id	sid	tid	token	lemma	pos
bam-6062	1	1	laser	laser	NOUN
bam-6062	1	2	-	-	PUNCT
bam-6062	1	3	induced	induce	VERB
bam-6062	1	4	carbon	carbon	NOUN
bam-6062	1	5	pyrolysis	pyrolysis	NOUN
bam-6062	1	6	of	of	ADP
bam-6062	1	7	electrodes	electrode	NOUN
bam-6062	1	8	for	for	ADP
bam-6062	1	9	neural	neural	ADJ
bam-6062	1	10	interface	interface	NOUN
bam-6062	1	11	systems	system	NOUN
bam-6062	1	12	eur	eur	PROPN
bam-6062	1	13	j	j	PROPN
bam-6062	1	14	transl	transl	PROPN
bam-6062	1	15	myol	myol	NOUN
bam-6062	1	16	26	26	NUM
bam-6062	1	17	(	(	PUNCT
bam-6062	1	18	3	3	NUM
bam-6062	1	19	):	):	PUNCT
bam-6062	1	20	181	181	NUM
bam-6062	1	21	-	-	SYM
bam-6062	1	22	186	186	NUM
bam-6062	1	23	181	181	NUM
bam-6062	1	24	laser	laser	NOUN
bam-6062	1	25	-	-	PUNCT
bam-6062	1	26	induced	induce	VERB
bam-6062	1	27	carbon	carbon	NOUN
bam-6062	1	28	pyrolysis	pyrolysis	NOUN
bam-6062	1	29	of	of	ADP
bam-6062	1	30	electrodes	electrode	NOUN
bam-6062	1	31	for	for	ADP
bam-6062	1	32	neural	neural	ADJ
bam-6062	1	33	interface	interface	NOUN
bam-6062	1	34	systems	system	NOUN
bam-6062	1	35	ana	ana	PROPN
bam-6062	1	36	oliveira	oliveira	PROPN
bam-6062	1	37	(	(	PUNCT
bam-6062	1	38	1	1	NUM
bam-6062	1	39	)	)	PUNCT
bam-6062	1	40	,	,	PUNCT
bam-6062	1	41	juan	juan	PROPN
bam-6062	1	42	s.	s.	PROPN
bam-6062	1	43	ordonez	ordonez	PROPN
bam-6062	1	44	(	(	PUNCT
bam-6062	1	45	2,3	2,3	NUM
bam-6062	1	46	)	)	PUNCT
bam-6062	1	47	,	,	PUNCT
bam-6062	1	48	danesh	danesh	PROPN
bam-6062	1	49	ashouri	ashouri	PROPN
bam-6062	1	50	vajari	vajari	PROPN
bam-6062	1	51	(	(	PUNCT
bam-6062	1	52	1	1	NUM
bam-6062	1	53	)	)	PUNCT
bam-6062	1	54	,	,	PUNCT
bam-6062	1	55	max	max	PROPN
bam-6062	1	56	eickenscheidt	eickenscheidt	PROPN
bam-6062	1	57	(	(	PUNCT
bam-6062	1	58	1	1	NUM
bam-6062	1	59	)	)	PUNCT
bam-6062	1	60	,	,	PUNCT
bam-6062	1	61	thomas	thomas	PROPN
bam-6062	1	62	stieglitz	stieglitz	PROPN
bam-6062	1	63	(	(	PUNCT
bam-6062	1	64	1	1	NUM
bam-6062	1	65	)	)	PUNCT
bam-6062	1	66	(	(	PUNCT
bam-6062	1	67	1	1	X
bam-6062	1	68	)	)	PUNCT
bam-6062	1	69	laboratory	laboratory	NOUN
bam-6062	1	70	for	for	ADP
bam-6062	1	71	biomedical	biomedical	ADJ
bam-6062	1	72	microtechnology	microtechnology	NOUN
bam-6062	1	73	,	,	PUNCT
bam-6062	1	74	department	department	NOUN
bam-6062	1	75	of	of	ADP
bam-6062	1	76	microsystems	microsystem	NOUN
bam-6062	1	77	engineering	engineering	NOUN
bam-6062	1	78	,	,	PUNCT
bam-6062	1	79	university	university	NOUN
bam-6062	1	80	of	of	ADP
bam-6062	1	81	freiburg	freiburg	PROPN
bam-6062	1	82	,	,	PUNCT
bam-6062	1	83	germany	germany	PROPN
bam-6062	1	84	;	;	PUNCT
bam-6062	1	85	(	(	PUNCT
bam-6062	1	86	2	2	X
bam-6062	1	87	)	)	PUNCT
bam-6062	1	88	medtronic	medtronic	ADJ
bam-6062	1	89	eindhoven	eindhoven	NOUN
bam-6062	1	90	design	design	NOUN
bam-6062	1	91	center	center	NOUN
bam-6062	1	92	(	(	PUNCT
bam-6062	1	93	medc	medc	NOUN
bam-6062	1	94	)	)	PUNCT
bam-6062	1	95	,	,	PUNCT
bam-6062	1	96	eindhoven	eindhoven	VERB
bam-6062	1	97	,	,	PUNCT
bam-6062	1	98	the	the	DET
bam-6062	1	99	netherlands	netherlands	PROPN
bam-6062	1	100	;	;	PUNCT
bam-6062	1	101	(	(	PUNCT
bam-6062	1	102	3	3	X
bam-6062	1	103	)	)	PUNCT
bam-6062	1	104	freiburg	freiburg	PROPN
bam-6062	1	105	institute	institute	PROPN
bam-6062	1	106	of	of	ADP
bam-6062	1	107	advanced	advanced	ADJ
bam-6062	1	108	studies	study	NOUN
bam-6062	1	109	(	(	PUNCT
bam-6062	1	110	frias	frias	PROPN
bam-6062	1	111	)	)	PUNCT
bam-6062	1	112	,	,	PUNCT
bam-6062	1	113	freiburg	freiburg	PROPN
bam-6062	1	114	,	,	PUNCT
bam-6062	1	115	germany	germany	PROPN
bam-6062	1	116	this	this	DET
bam-6062	1	117	article	article	NOUN
bam-6062	1	118	is	be	AUX
bam-6062	1	119	distributed	distribute	VERB
bam-6062	1	120	under	under	ADP
bam-6062	1	121	the	the	DET
bam-6062	1	122	terms	term	NOUN
bam-6062	1	123	of	of	ADP
bam-6062	1	124	the	the	DET
bam-6062	1	125	creative	creative	ADJ
bam-6062	1	126	commons	common	NOUN
bam-6062	1	127	attribution	attribution	NOUN
bam-6062	1	128	noncommercial	noncommercial	ADJ
bam-6062	1	129	license	license	NOUN
bam-6062	1	130	(	(	PUNCT
bam-6062	1	131	cc	cc	NOUN
bam-6062	1	132	by	by	ADP
bam-6062	1	133	-	-	PUNCT
bam-6062	1	134	nc	nc	PROPN
bam-6062	1	135	4.0	4.0	NUM
bam-6062	1	136	)	)	PUNCT
bam-6062	1	137	which	which	PRON
bam-6062	1	138	permits	permit	VERB
bam-6062	1	139	any	any	DET
bam-6062	1	140	noncommercial	noncommercial	ADJ
bam-6062	1	141	use	use	NOUN
bam-6062	1	142	,	,	PUNCT
bam-6062	1	143	distribution	distribution	NOUN
bam-6062	1	144	,	,	PUNCT
bam-6062	1	145	and	and	CCONJ
bam-6062	1	146	reproduction	reproduction	NOUN
bam-6062	1	147	in	in	ADP
bam-6062	1	148	any	any	DET
bam-6062	1	149	medium	medium	NOUN
bam-6062	1	150	,	,	PUNCT
bam-6062	1	151	provided	provide	VERB
bam-6062	1	152	the	the	DET
bam-6062	1	153	original	original	ADJ
bam-6062	1	154	author(s	author(s	NOUN
bam-6062	1	155	)	)	PUNCT
bam-6062	1	156	and	and	CCONJ
bam-6062	1	157	source	source	NOUN
bam-6062	1	158	are	be	AUX
bam-6062	1	159	credited	credit	VERB
bam-6062	1	160	.	.	PUNCT
bam-6062	2	1	abstract	abstract	ADV
bam-6062	2	2	the	the	DET
bam-6062	2	3	objective	objective	NOUN
bam-6062	2	4	of	of	ADP
bam-6062	2	5	this	this	DET
bam-6062	2	6	work	work	NOUN
bam-6062	2	7	is	be	AUX
bam-6062	2	8	to	to	PART
bam-6062	2	9	produce	produce	VERB
bam-6062	2	10	a	a	DET
bam-6062	2	11	laserfabricated	laserfabricate	VERB
bam-6062	2	12	polymer	polymer	NOUN
bam-6062	2	13	-	-	PUNCT
bam-6062	2	14	metal	metal	NOUN
bam-6062	2	15	-	-	PUNCT
bam-6062	2	16	polymer	polymer	NOUN
bam-6062	2	17	electrode	electrode	NOUN
bam-6062	2	18	with	with	ADP
bam-6062	2	19	the	the	DET
bam-6062	2	20	merit	merit	NOUN
bam-6062	2	21	of	of	ADP
bam-6062	2	22	a	a	DET
bam-6062	2	23	carbon	carbon	NOUN
bam-6062	2	24	-	-	PUNCT
bam-6062	2	25	based	base	VERB
bam-6062	2	26	coating	coating	NOUN
bam-6062	2	27	as	as	ADP
bam-6062	2	28	the	the	DET
bam-6062	2	29	active	active	ADJ
bam-6062	2	30	site	site	NOUN
bam-6062	2	31	.	.	PUNCT
bam-6062	3	1	a	a	DET
bam-6062	3	2	10	10	NUM
bam-6062	3	3	µm	µm	NOUN
bam-6062	3	4	-	-	PUNCT
bam-6062	3	5	thick	thick	ADJ
bam-6062	3	6	layer	layer	NOUN
bam-6062	3	7	of	of	ADP
bam-6062	3	8	parylene	parylene	NOUN
bam-6062	3	9	-	-	PUNCT
bam-6062	3	10	c	c	PROPN
bam-6062	3	11	is	be	AUX
bam-6062	3	12	used	use	VERB
bam-6062	3	13	serving	serve	VERB
bam-6062	3	14	as	as	ADP
bam-6062	3	15	the	the	DET
bam-6062	3	16	insulation	insulation	NOUN
bam-6062	3	17	layer	layer	NOUN
bam-6062	3	18	in	in	ADP
bam-6062	3	19	which	which	PRON
bam-6062	3	20	the	the	DET
bam-6062	3	21	active	active	ADJ
bam-6062	3	22	site	site	NOUN
bam-6062	3	23	is	be	AUX
bam-6062	3	24	locally	locally	ADV
bam-6062	3	25	laser	laser	NOUN
bam-6062	3	26	-	-	PUNCT
bam-6062	3	27	pyrolyzed	pyrolyze	VERB
bam-6062	3	28	.	.	PUNCT
bam-6062	4	1	our	our	PRON
bam-6062	4	2	preliminary	preliminary	ADJ
bam-6062	4	3	results	result	NOUN
bam-6062	4	4	show	show	VERB
bam-6062	4	5	that	that	SCONJ
bam-6062	4	6	the	the	DET
bam-6062	4	7	proposed	propose	VERB
bam-6062	4	8	method	method	NOUN
bam-6062	4	9	is	be	AUX
bam-6062	4	10	promising	promise	VERB
bam-6062	4	11	in	in	ADP
bam-6062	4	12	terms	term	NOUN
bam-6062	4	13	of	of	ADP
bam-6062	4	14	fabrication	fabrication	NOUN
bam-6062	4	15	feasibility	feasibility	NOUN
bam-6062	4	16	and	and	CCONJ
bam-6062	4	17	desired	desire	VERB
bam-6062	4	18	electrochemical	electrochemical	ADJ
bam-6062	4	19	capabilities	capability	NOUN
bam-6062	4	20	.	.	PUNCT
bam-6062	5	1	key	key	ADJ
bam-6062	5	2	words	word	NOUN
bam-6062	5	3	:	:	PUNCT
bam-6062	5	4	laser	laser	NOUN
bam-6062	5	5	-	-	PUNCT
bam-6062	5	6	induced	induce	VERB
bam-6062	5	7	carbon	carbon	NOUN
bam-6062	5	8	pyrolysis	pyrolysis	NOUN
bam-6062	5	9	,	,	PUNCT
bam-6062	5	10	electrodes	electrode	NOUN
bam-6062	5	11	,	,	PUNCT
bam-6062	5	12	neural	neural	ADJ
bam-6062	5	13	interface	interface	NOUN
bam-6062	5	14	systems	systems	PROPN
bam-6062	5	15	eur	eur	PROPN
bam-6062	5	16	j	j	PROPN
bam-6062	5	17	transl	transl	PROPN
bam-6062	5	18	myol	myol	NOUN
bam-6062	5	19	2016	2016	NUM
bam-6062	5	20	;	;	PUNCT
bam-6062	5	21	26	26	NUM
bam-6062	5	22	(	(	PUNCT
bam-6062	5	23	3	3	NUM
bam-6062	5	24	):	):	PUNCT
bam-6062	5	25	181	181	NUM
bam-6062	5	26	-	-	SYM
bam-6062	5	27	186	186	NUM
bam-6062	5	28	neural	neural	ADJ
bam-6062	5	29	interfacing	interface	VERB
bam-6062	5	30	systems	system	NOUN
bam-6062	5	31	(	(	PUNCT
bam-6062	5	32	nis	nis	NOUN
bam-6062	5	33	)	)	PUNCT
bam-6062	5	34	can	can	AUX
bam-6062	5	35	act	act	VERB
bam-6062	5	36	as	as	ADP
bam-6062	5	37	a	a	DET
bam-6062	5	38	bridge	bridge	NOUN
bam-6062	5	39	between	between	ADP
bam-6062	5	40	the	the	DET
bam-6062	5	41	body	body	NOUN
bam-6062	5	42	and	and	CCONJ
bam-6062	5	43	the	the	DET
bam-6062	5	44	exterior	exterior	ADJ
bam-6062	5	45	world	world	NOUN
bam-6062	5	46	when	when	SCONJ
bam-6062	5	47	the	the	DET
bam-6062	5	48	communication	communication	NOUN
bam-6062	5	49	between	between	ADP
bam-6062	5	50	the	the	DET
bam-6062	5	51	brain	brain	NOUN
bam-6062	5	52	and	and	CCONJ
bam-6062	5	53	the	the	DET
bam-6062	5	54	muscles	muscle	NOUN
bam-6062	5	55	or	or	CCONJ
bam-6062	5	56	organs	organ	NOUN
bam-6062	5	57	is	be	AUX
bam-6062	5	58	compromised	compromise	VERB
bam-6062	5	59	.	.	PUNCT
bam-6062	6	1	1	1	NUM
bam-6062	6	2	electrodes	electrode	NOUN
bam-6062	6	3	are	be	AUX
bam-6062	6	4	known	know	VERB
bam-6062	6	5	as	as	ADP
bam-6062	6	6	one	one	NUM
bam-6062	6	7	of	of	ADP
bam-6062	6	8	the	the	DET
bam-6062	6	9	most	most	ADV
bam-6062	6	10	crucial	crucial	ADJ
bam-6062	6	11	part	part	NOUN
bam-6062	6	12	of	of	ADP
bam-6062	6	13	the	the	DET
bam-6062	6	14	nis	nis	NOUN
bam-6062	6	15	due	due	ADP
bam-6062	6	16	to	to	ADP
bam-6062	6	17	their	their	PRON
bam-6062	6	18	functionality	functionality	NOUN
bam-6062	6	19	as	as	ADP
bam-6062	6	20	an	an	DET
bam-6062	6	21	active	active	ADJ
bam-6062	6	22	interface	interface	NOUN
bam-6062	6	23	in	in	ADP
bam-6062	6	24	direct	direct	ADJ
bam-6062	6	25	contact	contact	NOUN
bam-6062	6	26	with	with	ADP
bam-6062	6	27	the	the	DET
bam-6062	6	28	tissue	tissue	NOUN
bam-6062	6	29	.	.	PUNCT
bam-6062	7	1	noble	noble	ADJ
bam-6062	7	2	metals	metal	NOUN
bam-6062	7	3	have	have	AUX
bam-6062	7	4	been	be	AUX
bam-6062	7	5	widely	widely	ADV
bam-6062	7	6	used	use	VERB
bam-6062	7	7	as	as	ADP
bam-6062	7	8	electrode	electrode	NOUN
bam-6062	7	9	material	material	NOUN
bam-6062	7	10	for	for	ADP
bam-6062	7	11	both	both	PRON
bam-6062	7	12	stimulation	stimulation	NOUN
bam-6062	7	13	and	and	CCONJ
bam-6062	7	14	recording	recording	NOUN
bam-6062	7	15	applications	application	NOUN
bam-6062	7	16	.	.	PUNCT
bam-6062	8	1	2,3	2,3	NUM
bam-6062	8	2	however	however	ADV
bam-6062	8	3	,	,	PUNCT
bam-6062	8	4	degradation	degradation	NOUN
bam-6062	8	5	mechanisms	mechanism	NOUN
bam-6062	8	6	,	,	PUNCT
bam-6062	8	7	for	for	ADP
bam-6062	8	8	example	example	NOUN
bam-6062	8	9	due	due	ADP
bam-6062	8	10	to	to	ADP
bam-6062	8	11	limited	limited	ADJ
bam-6062	8	12	charge	charge	NOUN
bam-6062	8	13	injection	injection	NOUN
bam-6062	8	14	capacity	capacity	NOUN
bam-6062	8	15	restrict	restrict	VERB
bam-6062	8	16	their	their	PRON
bam-6062	8	17	usage	usage	NOUN
bam-6062	8	18	.	.	PUNCT
bam-6062	9	1	4,5	4,5	NUM
bam-6062	9	2	miniaturized	miniaturize	VERB
bam-6062	9	3	interfaces	interface	NOUN
bam-6062	9	4	,	,	PUNCT
bam-6062	9	5	on	on	ADP
bam-6062	9	6	which	which	PRON
bam-6062	9	7	the	the	DET
bam-6062	9	8	geometrical	geometrical	ADJ
bam-6062	9	9	surface	surface	NOUN
bam-6062	9	10	area	area	NOUN
bam-6062	9	11	for	for	ADP
bam-6062	9	12	a	a	DET
bam-6062	9	13	contact	contact	NOUN
bam-6062	9	14	is	be	AUX
bam-6062	9	15	restricted	restrict	VERB
bam-6062	9	16	,	,	PUNCT
bam-6062	9	17	challenge	challenge	VERB
bam-6062	9	18	the	the	DET
bam-6062	9	19	development	development	NOUN
bam-6062	9	20	of	of	ADP
bam-6062	9	21	new	new	ADJ
bam-6062	9	22	materials	material	NOUN
bam-6062	9	23	with	with	ADP
bam-6062	9	24	a	a	DET
bam-6062	9	25	high	high	ADJ
bam-6062	9	26	electrochemical	electrochemical	ADJ
bam-6062	9	27	performance	performance	NOUN
bam-6062	9	28	.	.	PUNCT
bam-6062	10	1	lately	lately	ADV
bam-6062	10	2	,	,	PUNCT
bam-6062	10	3	carbon	carbon	NOUN
bam-6062	10	4	based	base	VERB
bam-6062	10	5	materials	material	NOUN
bam-6062	10	6	have	have	AUX
bam-6062	10	7	emerged	emerge	VERB
bam-6062	10	8	as	as	ADP
bam-6062	10	9	a	a	DET
bam-6062	10	10	versatile	versatile	ADJ
bam-6062	10	11	and	and	CCONJ
bam-6062	10	12	potential	potential	ADJ
bam-6062	10	13	substitutes	substitute	NOUN
bam-6062	10	14	for	for	ADP
bam-6062	10	15	metal	metal	NOUN
bam-6062	10	16	electrodes	electrode	NOUN
bam-6062	10	17	.	.	PUNCT
bam-6062	11	1	6	6	NUM
bam-6062	11	2	this	this	PRON
bam-6062	11	3	is	be	AUX
bam-6062	11	4	attributed	attribute	VERB
bam-6062	11	5	to	to	ADP
bam-6062	11	6	their	their	PRON
bam-6062	11	7	superior	superior	ADJ
bam-6062	11	8	properties	property	NOUN
bam-6062	11	9	such	such	ADJ
bam-6062	11	10	as	as	ADP
bam-6062	11	11	biocompatibility	biocompatibility	NOUN
bam-6062	11	12	,	,	PUNCT
bam-6062	11	13	chemical	chemical	NOUN
bam-6062	11	14	inertness	inertness	NOUN
bam-6062	11	15	,	,	PUNCT
bam-6062	11	16	mechanical	mechanical	ADJ
bam-6062	11	17	robustness	robustness	NOUN
bam-6062	11	18	and	and	CCONJ
bam-6062	11	19	good	good	ADJ
bam-6062	11	20	electrochemical	electrochemical	ADJ
bam-6062	11	21	properties	property	NOUN
bam-6062	11	22	due	due	ADJ
bam-6062	11	23	to	to	ADP
bam-6062	11	24	a	a	DET
bam-6062	11	25	large	large	ADJ
bam-6062	11	26	effective	effective	ADJ
bam-6062	11	27	surface	surface	NOUN
bam-6062	11	28	area	area	NOUN
bam-6062	11	29	of	of	ADP
bam-6062	11	30	contact	contact	NOUN
bam-6062	11	31	.	.	PUNCT
bam-6062	12	1	4,5,7	4,5,7	NUM
bam-6062	12	2	amongst	amongst	ADP
bam-6062	12	3	carbon	carbon	NOUN
bam-6062	12	4	materials	material	NOUN
bam-6062	12	5	,	,	PUNCT
bam-6062	12	6	glassy	glassy	NOUN
bam-6062	12	7	carbon	carbon	NOUN
bam-6062	12	8	and	and	CCONJ
bam-6062	12	9	q	q	NOUN
bam-6062	12	10	-	-	PUNCT
bam-6062	12	11	carbon	carbon	NOUN
bam-6062	12	12	appears	appear	VERB
bam-6062	12	13	as	as	ADP
bam-6062	12	14	very	very	ADV
bam-6062	12	15	promising	promising	ADJ
bam-6062	12	16	materials	material	NOUN
bam-6062	12	17	.	.	PUNCT
bam-6062	13	1	8,9	8,9	NUM
bam-6062	13	2	glassy	glassy	NOUN
bam-6062	13	3	carbon	carbon	NOUN
bam-6062	13	4	has	have	AUX
bam-6062	13	5	already	already	ADV
bam-6062	13	6	showed	show	VERB
bam-6062	13	7	it	it	PRON
bam-6062	13	8	’s	’s	PART
bam-6062	13	9	applications	application	NOUN
bam-6062	13	10	in	in	ADP
bam-6062	13	11	neural	neural	ADJ
bam-6062	13	12	prosthetics	prosthetic	NOUN
bam-6062	13	13	,	,	PUNCT
bam-6062	13	14	with	with	ADP
bam-6062	13	15	unique	unique	ADJ
bam-6062	13	16	electrochemical	electrochemical	ADJ
bam-6062	13	17	performance	performance	NOUN
bam-6062	13	18	.	.	PUNCT
bam-6062	14	1	3,8	3,8	NUM
bam-6062	14	2	the	the	DET
bam-6062	14	3	just	just	ADV
bam-6062	14	4	recently	recently	ADV
bam-6062	14	5	discovered	discover	VERB
bam-6062	14	6	q	q	NOUN
bam-6062	14	7	-	-	PUNCT
bam-6062	14	8	carbon	carbon	NOUN
bam-6062	14	9	appeared	appear	VERB
bam-6062	14	10	to	to	PART
bam-6062	14	11	be	be	AUX
bam-6062	14	12	a	a	DET
bam-6062	14	13	very	very	ADV
bam-6062	14	14	promising	promising	ADJ
bam-6062	14	15	material	material	NOUN
bam-6062	14	16	by	by	ADP
bam-6062	14	17	facilitating	facilitate	VERB
bam-6062	14	18	improved	improved	ADJ
bam-6062	14	19	properties	property	NOUN
bam-6062	14	20	such	such	ADJ
bam-6062	14	21	as	as	ADP
bam-6062	14	22	mechanical	mechanical	ADJ
bam-6062	14	23	hardness	hardness	NOUN
bam-6062	14	24	,	,	PUNCT
bam-6062	14	25	electrical	electrical	ADJ
bam-6062	14	26	conductivity	conductivity	NOUN
bam-6062	14	27	,	,	PUNCT
bam-6062	14	28	chemical	chemical	NOUN
bam-6062	14	29	and	and	CCONJ
bam-6062	14	30	physical	physical	ADJ
bam-6062	14	31	characteristics	characteristic	NOUN
bam-6062	14	32	.	.	PUNCT
bam-6062	15	1	9	9	NUM
bam-6062	15	2	q	q	NOUN
bam-6062	15	3	-	-	PUNCT
bam-6062	15	4	carbon	carbon	NOUN
bam-6062	15	5	is	be	AUX
bam-6062	15	6	produced	produce	VERB
bam-6062	15	7	using	use	VERB
bam-6062	15	8	a	a	DET
bam-6062	15	9	laser	laser	NOUN
bam-6062	15	10	and	and	CCONJ
bam-6062	15	11	having	have	VERB
bam-6062	15	12	an	an	DET
bam-6062	15	13	amorphous	amorphous	ADJ
bam-6062	15	14	carbon	carbon	NOUN
bam-6062	15	15	coating	coating	NOUN
bam-6062	15	16	as	as	ADP
bam-6062	15	17	the	the	DET
bam-6062	15	18	initial	initial	ADJ
bam-6062	15	19	substrate	substrate	NOUN
bam-6062	15	20	.	.	PUNCT
bam-6062	16	1	9	9	NUM
bam-6062	16	2	glassy	glassy	NOUN
bam-6062	16	3	carbon	carbon	NOUN
bam-6062	16	4	for	for	ADP
bam-6062	16	5	instance	instance	NOUN
bam-6062	16	6	can	can	AUX
bam-6062	16	7	be	be	AUX
bam-6062	16	8	produced	produce	VERB
bam-6062	16	9	by	by	ADP
bam-6062	16	10	the	the	DET
bam-6062	16	11	pyrolysis	pyrolysis	NOUN
bam-6062	16	12	of	of	ADP
bam-6062	16	13	highcarbon	highcarbon	NOUN
bam-6062	16	14	content	content	NOUN
bam-6062	16	15	polymers	polymer	NOUN
bam-6062	16	16	such	such	ADJ
bam-6062	16	17	as	as	ADP
bam-6062	16	18	kapton	kapton	PROPN
bam-6062	16	19	10	10	NUM
bam-6062	16	20	and	and	CCONJ
bam-6062	16	21	su-8	su-8	ADV
bam-6062	16	22	.	.	NOUN
bam-6062	16	23	3	3	NUM
bam-6062	16	24	the	the	DET
bam-6062	16	25	typical	typical	ADJ
bam-6062	16	26	pyrolysis	pyrolysis	NOUN
bam-6062	16	27	process	process	NOUN
bam-6062	16	28	consists	consist	VERB
bam-6062	16	29	in	in	ADP
bam-6062	16	30	using	use	VERB
bam-6062	16	31	a	a	DET
bam-6062	16	32	furnace	furnace	NOUN
bam-6062	16	33	at	at	ADP
bam-6062	16	34	high	high	ADJ
bam-6062	16	35	temperatures	temperature	NOUN
bam-6062	16	36	in	in	ADP
bam-6062	16	37	an	an	DET
bam-6062	16	38	inert	inert	ADJ
bam-6062	16	39	atmosphere	atmosphere	NOUN
bam-6062	16	40	.	.	PUNCT
bam-6062	17	1	7	7	NUM
bam-6062	17	2	this	this	DET
bam-6062	17	3	high	high	ADJ
bam-6062	17	4	temperature	temperature	NOUN
bam-6062	17	5	restricts	restrict	VERB
bam-6062	17	6	the	the	DET
bam-6062	17	7	fabrication	fabrication	NOUN
bam-6062	17	8	procedure	procedure	NOUN
bam-6062	17	9	,	,	PUNCT
bam-6062	17	10	as	as	SCONJ
bam-6062	17	11	it	it	PRON
bam-6062	17	12	has	have	VERB
bam-6062	17	13	to	to	PART
bam-6062	17	14	take	take	VERB
bam-6062	17	15	place	place	NOUN
bam-6062	17	16	at	at	ADP
bam-6062	17	17	the	the	DET
bam-6062	17	18	beginning	beginning	NOUN
bam-6062	17	19	of	of	ADP
bam-6062	17	20	the	the	DET
bam-6062	17	21	microfabrication	microfabrication	NOUN
bam-6062	17	22	procedure	procedure	NOUN
bam-6062	17	23	,	,	PUNCT
bam-6062	17	24	unless	unless	SCONJ
bam-6062	17	25	the	the	DET
bam-6062	17	26	electrodes	electrode	NOUN
bam-6062	17	27	are	be	AUX
bam-6062	17	28	composed	compose	VERB
bam-6062	17	29	of	of	ADP
bam-6062	17	30	purely	purely	ADV
bam-6062	17	31	semiconductor	semiconductor	NOUN
bam-6062	17	32	or	or	CCONJ
bam-6062	17	33	ceramic	ceramic	ADJ
bam-6062	17	34	materials	material	NOUN
bam-6062	17	35	.	.	PUNCT
bam-6062	18	1	photolithography	photolithography	NOUN
bam-6062	18	2	technique	technique	NOUN
bam-6062	18	3	can	can	AUX
bam-6062	18	4	be	be	AUX
bam-6062	18	5	also	also	ADV
bam-6062	18	6	employed	employ	VERB
bam-6062	18	7	7	7	NUM
bam-6062	18	8	but	but	CCONJ
bam-6062	18	9	it	it	PRON
bam-6062	18	10	requires	require	VERB
bam-6062	18	11	the	the	DET
bam-6062	18	12	use	use	NOUN
bam-6062	18	13	of	of	ADP
bam-6062	18	14	masks	mask	NOUN
bam-6062	18	15	and	and	CCONJ
bam-6062	18	16	clean	clean	ADJ
bam-6062	18	17	room	room	NOUN
bam-6062	18	18	facilities	facility	NOUN
bam-6062	18	19	which	which	PRON
bam-6062	18	20	raises	raise	VERB
bam-6062	18	21	the	the	DET
bam-6062	18	22	complexity	complexity	NOUN
bam-6062	18	23	and	and	CCONJ
bam-6062	18	24	fabrication	fabrication	NOUN
bam-6062	18	25	costs	cost	NOUN
bam-6062	18	26	.	.	PUNCT
bam-6062	19	1	however	however	ADV
bam-6062	19	2	,	,	PUNCT
bam-6062	19	3	using	use	VERB
bam-6062	19	4	the	the	DET
bam-6062	19	5	laser	laser	NOUN
bam-6062	19	6	as	as	SCONJ
bam-6062	19	7	pyrolysis	pyrolysis	NOUN
bam-6062	19	8	method	method	NOUN
bam-6062	19	9	has	have	AUX
bam-6062	19	10	also	also	ADV
bam-6062	19	11	been	be	AUX
bam-6062	19	12	reported	report	VERB
bam-6062	19	13	.	.	PUNCT
bam-6062	20	1	7,10	7,10	NOUN
bam-6062	21	1	the	the	DET
bam-6062	21	2	pyrolysis	pyrolysis	NOUN
bam-6062	21	3	method	method	NOUN
bam-6062	21	4	using	use	VERB
bam-6062	21	5	laser	laser	NOUN
bam-6062	21	6	is	be	AUX
bam-6062	21	7	advantageous	advantageous	ADJ
bam-6062	21	8	as	as	SCONJ
bam-6062	21	9	compared	compare	VERB
bam-6062	21	10	to	to	ADP
bam-6062	21	11	the	the	DET
bam-6062	21	12	other	other	ADJ
bam-6062	21	13	mentioned	mention	VERB
bam-6062	21	14	methods	method	NOUN
bam-6062	21	15	as	as	SCONJ
bam-6062	21	16	it	it	PRON
bam-6062	21	17	avoids	avoid	VERB
bam-6062	21	18	the	the	DET
bam-6062	21	19	use	use	NOUN
bam-6062	21	20	of	of	ADP
bam-6062	21	21	high	high	ADJ
bam-6062	21	22	temperatures	temperature	NOUN
bam-6062	21	23	and	and	CCONJ
bam-6062	21	24	requires	require	VERB
bam-6062	21	25	no	no	DET
bam-6062	21	26	need	need	NOUN
bam-6062	21	27	for	for	ADP
bam-6062	21	28	the	the	DET
bam-6062	21	29	cleanroom	cleanroom	NOUN
bam-6062	21	30	processes	process	NOUN
bam-6062	21	31	.	.	PUNCT
bam-6062	22	1	laser	laser	NOUN
bam-6062	22	2	technology	technology	NOUN
bam-6062	22	3	enables	enable	VERB
bam-6062	22	4	local	local	ADJ
bam-6062	22	5	carbonization	carbonization	NOUN
bam-6062	22	6	at	at	ADP
bam-6062	22	7	the	the	DET
bam-6062	22	8	desired	desire	VERB
bam-6062	22	9	spot	spot	NOUN
bam-6062	22	10	,	,	PUNCT
bam-6062	22	11	is	be	AUX
bam-6062	22	12	fast	fast	ADJ
bam-6062	22	13	and	and	CCONJ
bam-6062	22	14	allows	allow	VERB
bam-6062	22	15	highest	high	ADJ
bam-6062	22	16	flexibility	flexibility	NOUN
bam-6062	22	17	.	.	PUNCT
bam-6062	23	1	11	11	NUM
bam-6062	23	2	within	within	ADP
bam-6062	23	3	this	this	DET
bam-6062	23	4	work	work	NOUN
bam-6062	23	5	,	,	PUNCT
bam-6062	23	6	we	we	PRON
bam-6062	23	7	report	report	VERB
bam-6062	23	8	on	on	ADP
bam-6062	23	9	a	a	DET
bam-6062	23	10	novel	novel	ADJ
bam-6062	23	11	electrode	electrode	NOUN
bam-6062	23	12	fabrication	fabrication	NOUN
bam-6062	23	13	process	process	NOUN
bam-6062	23	14	that	that	PRON
bam-6062	23	15	merges	merge	VERB
bam-6062	23	16	the	the	DET
bam-6062	23	17	cost	cost	NOUN
bam-6062	23	18	,	,	PUNCT
bam-6062	23	19	time	time	NOUN
bam-6062	23	20	and	and	CCONJ
bam-6062	23	21	production	production	NOUN
bam-6062	23	22	advantages	advantage	NOUN
bam-6062	23	23	of	of	ADP
bam-6062	23	24	multiple	multiple	ADJ
bam-6062	23	25	technological	technological	ADJ
bam-6062	23	26	processes	process	NOUN
bam-6062	23	27	to	to	PART
bam-6062	23	28	fabricate	fabricate	VERB
bam-6062	23	29	electrodes	electrode	NOUN
bam-6062	23	30	with	with	ADP
bam-6062	23	31	advanced	advanced	ADJ
bam-6062	23	32	electrochemical	electrochemical	ADJ
bam-6062	23	33	performance	performance	NOUN
bam-6062	23	34	.	.	PUNCT
bam-6062	24	1	the	the	DET
bam-6062	24	2	goal	goal	NOUN
bam-6062	24	3	of	of	ADP
bam-6062	24	4	this	this	DET
bam-6062	24	5	work	work	NOUN
bam-6062	24	6	is	be	AUX
bam-6062	24	7	also	also	ADV
bam-6062	24	8	to	to	PART
bam-6062	24	9	investigate	investigate	VERB
bam-6062	24	10	the	the	DET
bam-6062	24	11	properties	property	NOUN
bam-6062	24	12	of	of	ADP
bam-6062	24	13	laserbased	laserbase	VERB
bam-6062	24	14	carbon	carbon	NOUN
bam-6062	24	15	pyrolysis	pyrolysis	NOUN
bam-6062	24	16	for	for	ADP
bam-6062	24	17	electrodes	electrode	NOUN
bam-6062	24	18	in	in	ADP
bam-6062	24	19	nis	nis	NOUN
bam-6062	24	20	and	and	CCONJ
bam-6062	24	21	bring	bring	VERB
bam-6062	24	22	its	its	PRON
bam-6062	24	23	development	development	NOUN
bam-6062	24	24	closer	close	ADV
bam-6062	24	25	to	to	ADP
bam-6062	24	26	in	in	ADP
bam-6062	24	27	vivo	vivo	ADJ
bam-6062	24	28	applications	application	NOUN
bam-6062	24	29	.	.	PUNCT
bam-6062	25	1	the	the	DET
bam-6062	25	2	proposed	propose	VERB
bam-6062	25	3	method	method	NOUN
bam-6062	25	4	uses	use	VERB
bam-6062	25	5	laser	laser	NOUN
bam-6062	25	6	-	-	PUNCT
bam-6062	25	7	machining	machining	NOUN
bam-6062	25	8	to	to	PART
bam-6062	25	9	produce	produce	VERB
bam-6062	25	10	structured	structured	ADJ
bam-6062	25	11	polymer	polymer	NOUN
bam-6062	25	12	-	-	PUNCT
bam-6062	25	13	metal	metal	NOUN
bam-6062	25	14	-	-	PUNCT
bam-6062	25	15	polymer	polymer	NOUN
bam-6062	25	16	electrode	electrode	NOUN
bam-6062	25	17	arrays	array	VERB
bam-6062	25	18	.	.	PUNCT
bam-6062	26	1	the	the	DET
bam-6062	26	2	elegance	elegance	NOUN
bam-6062	26	3	of	of	ADP
bam-6062	26	4	the	the	DET
bam-6062	26	5	process	process	NOUN
bam-6062	26	6	lies	lie	VERB
bam-6062	26	7	in	in	ADP
bam-6062	26	8	the	the	DET
bam-6062	26	9	fact	fact	NOUN
bam-6062	26	10	that	that	SCONJ
bam-6062	26	11	the	the	DET
bam-6062	26	12	same	same	ADJ
bam-6062	26	13	material	material	NOUN
bam-6062	26	14	serving	serve	VERB
bam-6062	26	15	as	as	ADP
bam-6062	26	16	a	a	DET
bam-6062	26	17	coating	coating	NOUN
bam-6062	26	18	and	and	CCONJ
bam-6062	26	19	insulation	insulation	NOUN
bam-6062	26	20	between	between	ADP
bam-6062	26	21	metal	metal	NOUN
bam-6062	26	22	lines	line	NOUN
bam-6062	26	23	is	be	AUX
bam-6062	26	24	locally	locally	ADV
bam-6062	26	25	transformed	transform	VERB
bam-6062	26	26	by	by	ADP
bam-6062	26	27	laser	laser	NOUN
bam-6062	26	28	to	to	ADP
bam-6062	26	29	an	an	DET
bam-6062	26	30	improved	improved	ADJ
bam-6062	26	31	carbonlaser	carbonlaser	NOUN
bam-6062	26	32	-	-	PUNCT
bam-6062	26	33	induced	induce	VERB
bam-6062	26	34	carbon	carbon	NOUN
bam-6062	26	35	pyrolysis	pyrolysis	NOUN
bam-6062	26	36	of	of	ADP
bam-6062	26	37	electrodes	electrode	NOUN
bam-6062	26	38	for	for	ADP
bam-6062	26	39	neural	neural	ADJ
bam-6062	26	40	interface	interface	NOUN
bam-6062	26	41	systems	system	NOUN
bam-6062	26	42	eur	eur	PROPN
bam-6062	26	43	j	j	PROPN
bam-6062	26	44	transl	transl	PROPN
bam-6062	26	45	myol	myol	NOUN
bam-6062	26	46	26	26	NUM
bam-6062	26	47	(	(	PUNCT
bam-6062	26	48	3	3	NUM
bam-6062	26	49	):	):	PUNCT
bam-6062	26	50	181	181	NUM
bam-6062	26	51	-	-	SYM
bam-6062	26	52	186	186	NUM
bam-6062	26	53	182	182	NUM
bam-6062	26	54	based	base	VERB
bam-6062	26	55	coatings	coating	NOUN
bam-6062	26	56	at	at	ADP
bam-6062	26	57	the	the	DET
bam-6062	26	58	active	active	ADJ
bam-6062	26	59	sites	site	NOUN
bam-6062	26	60	.	.	PUNCT
bam-6062	27	1	the	the	DET
bam-6062	27	2	material	material	NOUN
bam-6062	27	3	used	use	VERB
bam-6062	27	4	as	as	ADP
bam-6062	27	5	precursor	precursor	NOUN
bam-6062	27	6	of	of	ADP
bam-6062	27	7	the	the	DET
bam-6062	27	8	carbon	carbon	NOUN
bam-6062	27	9	-	-	PUNCT
bam-6062	27	10	based	base	VERB
bam-6062	27	11	material	material	NOUN
bam-6062	27	12	is	be	AUX
bam-6062	27	13	parylene	parylene	NOUN
bam-6062	27	14	-	-	PUNCT
bam-6062	27	15	c	c	NOUN
bam-6062	27	16	which	which	PRON
bam-6062	27	17	is	be	AUX
bam-6062	27	18	known	know	VERB
bam-6062	27	19	as	as	ADP
bam-6062	27	20	a	a	DET
bam-6062	27	21	biocompatible	biocompatible	ADJ
bam-6062	27	22	,	,	PUNCT
bam-6062	27	23	mechanically	mechanically	ADV
bam-6062	27	24	robust	robust	ADJ
bam-6062	27	25	and	and	CCONJ
bam-6062	27	26	medically	medically	ADV
bam-6062	27	27	approved	approve	VERB
bam-6062	27	28	material	material	NOUN
bam-6062	27	29	.	.	PUNCT
bam-6062	28	1	2	2	NUM
bam-6062	28	2	materials	material	NOUN
bam-6062	28	3	and	and	CCONJ
bam-6062	28	4	methods	method	NOUN
bam-6062	28	5	process	process	VERB
bam-6062	28	6	the	the	DET
bam-6062	28	7	fabrication	fabrication	NOUN
bam-6062	28	8	process	process	NOUN
bam-6062	28	9	starts	start	VERB
bam-6062	28	10	with	with	ADP
bam-6062	28	11	lamination	lamination	NOUN
bam-6062	28	12	of	of	ADP
bam-6062	28	13	self	self	NOUN
bam-6062	28	14	adhesive	adhesive	ADJ
bam-6062	28	15	tape	tape	NOUN
bam-6062	28	16	(	(	PUNCT
bam-6062	28	17	no	no	INTJ
bam-6062	28	18	.	.	NOUN
bam-6062	28	19	4124	4124	NUM
bam-6062	28	20	by	by	ADP
bam-6062	28	21	tesa	tesa	PROPN
bam-6062	28	22	ag	ag	PROPN
bam-6062	28	23	,	,	PUNCT
bam-6062	28	24	hamburg	hamburg	PROPN
bam-6062	28	25	,	,	PUNCT
bam-6062	28	26	germany	germany	PROPN
bam-6062	28	27	)	)	PUNCT
bam-6062	28	28	onto	onto	ADP
bam-6062	28	29	a	a	DET
bam-6062	28	30	ceramic	ceramic	ADJ
bam-6062	28	31	carrier	carrier	NOUN
bam-6062	28	32	(	(	PUNCT
bam-6062	28	33	fig.1.a	fig.1.a	NUM
bam-6062	28	34	)	)	PUNCT
bam-6062	28	35	.	.	PUNCT
bam-6062	29	1	this	this	DET
bam-6062	29	2	sheet	sheet	NOUN
bam-6062	29	3	acts	act	VERB
bam-6062	29	4	as	as	ADP
bam-6062	29	5	release	release	NOUN
bam-6062	29	6	layer	layer	NOUN
bam-6062	29	7	to	to	PART
bam-6062	29	8	separate	separate	VERB
bam-6062	29	9	the	the	DET
bam-6062	29	10	electrode	electrode	NOUN
bam-6062	29	11	from	from	ADP
bam-6062	29	12	the	the	DET
bam-6062	29	13	ceramic	ceramic	ADJ
bam-6062	29	14	carrier	carrier	NOUN
bam-6062	29	15	in	in	ADP
bam-6062	29	16	the	the	DET
bam-6062	29	17	last	last	ADJ
bam-6062	29	18	step	step	NOUN
bam-6062	29	19	.	.	PUNCT
bam-6062	30	1	then	then	ADV
bam-6062	30	2	,	,	PUNCT
bam-6062	30	3	a	a	DET
bam-6062	30	4	layer	layer	NOUN
bam-6062	30	5	of	of	ADP
bam-6062	30	6	approximately	approximately	ADV
bam-6062	30	7	200	200	NUM
bam-6062	30	8	µm	µm	ADP
bam-6062	30	9	diluted	dilute	VERB
bam-6062	30	10	silicone	silicone	NOUN
bam-6062	30	11	rubber	rubber	NOUN
bam-6062	30	12	(	(	PUNCT
bam-6062	30	13	med1000,nusil	med1000,nusil	PROPN
bam-6062	30	14	,	,	PUNCT
bam-6062	30	15	carpinteria	carpinteria	PROPN
bam-6062	30	16	,	,	PUNCT
bam-6062	30	17	usa	usa	PROPN
bam-6062	30	18	)	)	PUNCT
bam-6062	30	19	was	be	AUX
bam-6062	30	20	spin	spin	NOUN
bam-6062	30	21	coated	coat	VERB
bam-6062	30	22	on	on	ADP
bam-6062	30	23	top	top	ADJ
bam-6062	30	24	(	(	PUNCT
bam-6062	30	25	fig.1.b	fig.1.b	X
bam-6062	30	26	)	)	PUNCT
bam-6062	30	27	.	.	PUNCT
bam-6062	31	1	the	the	DET
bam-6062	31	2	diluted	diluted	ADJ
bam-6062	31	3	silicone	silicone	NOUN
bam-6062	31	4	rubber	rubber	NOUN
bam-6062	31	5	(	(	PUNCT
bam-6062	31	6	with	with	ADP
bam-6062	31	7	n	n	CCONJ
bam-6062	31	8	-	-	PUNCT
bam-6062	31	9	heptane	heptane	NOUN
bam-6062	31	10	in	in	ADP
bam-6062	31	11	a	a	DET
bam-6062	31	12	volume	volume	NOUN
bam-6062	31	13	ratio	ratio	NOUN
bam-6062	31	14	of	of	ADP
bam-6062	31	15	1:1	1:1	NUM
bam-6062	31	16	)	)	PUNCT
bam-6062	31	17	was	be	AUX
bam-6062	31	18	used	use	VERB
bam-6062	31	19	in	in	ADP
bam-6062	31	20	order	order	NOUN
bam-6062	31	21	to	to	PART
bam-6062	31	22	yield	yield	VERB
bam-6062	31	23	a	a	DET
bam-6062	31	24	more	more	ADV
bam-6062	31	25	homogeneous	homogeneous	ADJ
bam-6062	31	26	coating	coating	NOUN
bam-6062	31	27	.	.	PUNCT
bam-6062	32	1	before	before	SCONJ
bam-6062	32	2	the	the	DET
bam-6062	32	3	spin	spin	NOUN
bam-6062	32	4	coated	coated	ADJ
bam-6062	32	5	silicone	silicone	NOUN
bam-6062	32	6	rubber	rubber	NOUN
bam-6062	32	7	is	be	AUX
bam-6062	32	8	fully	fully	ADV
bam-6062	32	9	cured	cure	VERB
bam-6062	32	10	,	,	PUNCT
bam-6062	32	11	a	a	DET
bam-6062	32	12	thin	thin	ADJ
bam-6062	32	13	platinum	platinum	NOUN
bam-6062	32	14	-	-	PUNCT
bam-6062	32	15	iridium	iridium	NOUN
bam-6062	32	16	foil	foil	NOUN
bam-6062	32	17	(	(	PUNCT
bam-6062	32	18	25	25	NUM
bam-6062	32	19	µm	µm	NOUN
bam-6062	32	20	)	)	PUNCT
bam-6062	32	21	was	be	AUX
bam-6062	32	22	laminated	laminate	VERB
bam-6062	32	23	onto	onto	ADP
bam-6062	32	24	it	it	PRON
bam-6062	32	25	(	(	PUNCT
bam-6062	32	26	fig.1.c	fig.1.c	NOUN
bam-6062	32	27	)	)	PUNCT
bam-6062	32	28	.	.	PUNCT
bam-6062	33	1	a	a	DET
bam-6062	33	2	nanosecond	nanosecond	NOUN
bam-6062	33	3	pulsed	pulse	VERB
bam-6062	33	4	laser	laser	NOUN
bam-6062	33	5	(	(	PUNCT
bam-6062	33	6	dpl	dpl	PROPN
bam-6062	33	7	genesis	genesis	PROPN
bam-6062	33	8	marker	marker	NOUN
bam-6062	33	9	nd	nd	PRON
bam-6062	33	10	:	:	PUNCT
bam-6062	33	11	yag	yag	NOUN
bam-6062	33	12	,	,	PUNCT
bam-6062	33	13	aci	aci	PROPN
bam-6062	33	14	laser	laser	PROPN
bam-6062	33	15	gmbh	gmbh	PROPN
bam-6062	33	16	,	,	PUNCT
bam-6062	33	17	deutschland	deutschland	NOUN
bam-6062	33	18	)	)	PUNCT
bam-6062	33	19	was	be	AUX
bam-6062	33	20	used	use	VERB
bam-6062	33	21	to	to	PART
bam-6062	33	22	cut	cut	VERB
bam-6062	33	23	out	out	ADP
bam-6062	33	24	the	the	DET
bam-6062	33	25	electrode	electrode	NOUN
bam-6062	33	26	sides	side	NOUN
bam-6062	33	27	,	,	PUNCT
bam-6062	33	28	tracks	track	NOUN
bam-6062	33	29	and	and	CCONJ
bam-6062	33	30	contacts	contact	NOUN
bam-6062	33	31	(	(	PUNCT
bam-6062	33	32	fig.1.d	fig.1.d	ADJ
bam-6062	33	33	)	)	PUNCT
bam-6062	33	34	.	.	PUNCT
bam-6062	34	1	in	in	ADP
bam-6062	34	2	order	order	NOUN
bam-6062	34	3	to	to	PART
bam-6062	34	4	anchor	anchor	VERB
bam-6062	34	5	the	the	DET
bam-6062	34	6	foil	foil	NOUN
bam-6062	34	7	and	and	CCONJ
bam-6062	34	8	the	the	DET
bam-6062	34	9	polymers	polymer	NOUN
bam-6062	34	10	,	,	PUNCT
bam-6062	34	11	additional	additional	ADJ
bam-6062	34	12	small	small	ADJ
bam-6062	34	13	openings	opening	NOUN
bam-6062	34	14	were	be	AUX
bam-6062	34	15	introduced	introduce	VERB
bam-6062	34	16	in	in	ADP
bam-6062	34	17	the	the	DET
bam-6062	34	18	outer	outer	ADJ
bam-6062	34	19	vicinity	vicinity	NOUN
bam-6062	34	20	of	of	ADP
bam-6062	34	21	the	the	DET
bam-6062	34	22	electrode	electrode	ADJ
bam-6062	34	23	active	active	ADJ
bam-6062	34	24	site	site	NOUN
bam-6062	34	25	.	.	PUNCT
bam-6062	35	1	2	2	NUM
bam-6062	35	2	having	having	AUX
bam-6062	35	3	removed	remove	VERB
bam-6062	35	4	the	the	DET
bam-6062	35	5	excess	excess	ADJ
bam-6062	35	6	metal	metal	NOUN
bam-6062	35	7	with	with	ADP
bam-6062	35	8	tweezers	tweezer	NOUN
bam-6062	35	9	,	,	PUNCT
bam-6062	35	10	a	a	DET
bam-6062	35	11	parylene	parylene	NOUN
bam-6062	35	12	-	-	PUNCT
bam-6062	35	13	c	c	NOUN
bam-6062	35	14	(	(	PUNCT
bam-6062	35	15	dpxc	dpxc	NOUN
bam-6062	35	16	by	by	ADP
bam-6062	35	17	specialty	specialty	NOUN
bam-6062	35	18	coating	coating	NOUN
bam-6062	35	19	systems	system	NOUN
bam-6062	35	20	,	,	PUNCT
bam-6062	35	21	indianapolis	indianapolis	PROPN
bam-6062	35	22	,	,	PUNCT
bam-6062	35	23	usa	usa	PROPN
bam-6062	35	24	)	)	PUNCT
bam-6062	35	25	layer	layer	NOUN
bam-6062	35	26	of	of	ADP
bam-6062	35	27	10	10	NUM
bam-6062	35	28	µm	µm	NOUN
bam-6062	35	29	is	be	AUX
bam-6062	35	30	deposited	deposit	VERB
bam-6062	35	31	on	on	ADP
bam-6062	35	32	top	top	ADJ
bam-6062	35	33	(	(	PUNCT
bam-6062	35	34	fig1.e	fig1.e	NOUN
bam-6062	35	35	-	-	PUNCT
bam-6062	35	36	f	f	NOUN
bam-6062	35	37	)	)	PUNCT
bam-6062	35	38	with	with	ADP
bam-6062	35	39	a	a	DET
bam-6062	35	40	parylene	parylene	ADJ
bam-6062	35	41	-	-	PUNCT
bam-6062	35	42	c	c	NOUN
bam-6062	35	43	deposition	deposition	NOUN
bam-6062	35	44	unit	unit	NOUN
bam-6062	35	45	(	(	PUNCT
bam-6062	35	46	pds	pds	NOUN
bam-6062	35	47	2010	2010	NUM
bam-6062	35	48	lab	lab	NOUN
bam-6062	35	49	-	-	PUNCT
bam-6062	35	50	cotertm	cotertm	NOUN
bam-6062	35	51	by	by	ADP
bam-6062	35	52	specialty	specialty	NOUN
bam-6062	35	53	coating	coating	NOUN
bam-6062	35	54	systems	system	NOUN
bam-6062	35	55	,	,	PUNCT
bam-6062	35	56	indianapolis	indianapolis	PROPN
bam-6062	35	57	,	,	PUNCT
bam-6062	35	58	usa	usa	PROPN
bam-6062	35	59	)	)	PUNCT
bam-6062	35	60	.	.	PUNCT
bam-6062	36	1	this	this	DET
bam-6062	36	2	polymer	polymer	NOUN
bam-6062	36	3	has	have	VERB
bam-6062	36	4	a	a	DET
bam-6062	36	5	high	high	ADJ
bam-6062	36	6	quantity	quantity	NOUN
bam-6062	36	7	of	of	ADP
bam-6062	36	8	carbon	carbon	NOUN
bam-6062	36	9	in	in	ADP
bam-6062	36	10	composition	composition	NOUN
bam-6062	36	11	which	which	PRON
bam-6062	36	12	makes	make	VERB
bam-6062	36	13	it	it	PRON
bam-6062	36	14	suitable	suitable	ADJ
bam-6062	36	15	to	to	PART
bam-6062	36	16	be	be	AUX
bam-6062	36	17	a	a	DET
bam-6062	36	18	precursor	precursor	NOUN
bam-6062	36	19	of	of	ADP
bam-6062	36	20	the	the	DET
bam-6062	36	21	carbonized	carbonize	VERB
bam-6062	36	22	material	material	NOUN
bam-6062	36	23	.	.	PUNCT
bam-6062	37	1	using	use	VERB
bam-6062	37	2	the	the	DET
bam-6062	37	3	same	same	ADJ
bam-6062	37	4	laser	laser	NOUN
bam-6062	37	5	,	,	PUNCT
bam-6062	37	6	but	but	CCONJ
bam-6062	37	7	different	different	ADJ
bam-6062	37	8	parameters	parameter	NOUN
bam-6062	37	9	,	,	PUNCT
bam-6062	37	10	the	the	DET
bam-6062	37	11	parylene	parylene	NOUN
bam-6062	37	12	-	-	PUNCT
bam-6062	37	13	c	c	PROPN
bam-6062	37	14	was	be	AUX
bam-6062	37	15	carbonized	carbonize	VERB
bam-6062	37	16	by	by	ADP
bam-6062	37	17	pyrolysis	pyrolysis	NOUN
bam-6062	37	18	at	at	ADP
bam-6062	37	19	the	the	DET
bam-6062	37	20	desired	desire	VERB
bam-6062	37	21	site	site	NOUN
bam-6062	37	22	on	on	ADP
bam-6062	37	23	top	top	NOUN
bam-6062	37	24	of	of	ADP
bam-6062	37	25	the	the	DET
bam-6062	37	26	platinum	platinum	NOUN
bam-6062	37	27	layer	layer	NOUN
bam-6062	37	28	.	.	PUNCT
bam-6062	38	1	here	here	ADV
bam-6062	38	2	,	,	PUNCT
bam-6062	38	3	the	the	DET
bam-6062	38	4	pyrolyzed	pyrolyzed	ADJ
bam-6062	38	5	material	material	NOUN
bam-6062	38	6	forms	form	VERB
bam-6062	38	7	a	a	DET
bam-6062	38	8	conductive	conductive	ADJ
bam-6062	38	9	connection	connection	NOUN
bam-6062	38	10	to	to	ADP
bam-6062	38	11	the	the	DET
bam-6062	38	12	platinum	platinum	NOUN
bam-6062	38	13	-	-	PUNCT
bam-6062	38	14	iridium	iridium	NOUN
bam-6062	38	15	foil	foil	NOUN
bam-6062	38	16	(	(	PUNCT
bam-6062	38	17	fig.1.g	fig.1.g	X
bam-6062	38	18	)	)	PUNCT
bam-6062	38	19	.	.	PUNCT
bam-6062	39	1	laser	laser	NOUN
bam-6062	39	2	ablation	ablation	NOUN
bam-6062	39	3	was	be	AUX
bam-6062	39	4	used	use	VERB
bam-6062	39	5	,	,	PUNCT
bam-6062	39	6	to	to	PART
bam-6062	39	7	remove	remove	VERB
bam-6062	39	8	the	the	DET
bam-6062	39	9	parylene	parylene	NOUN
bam-6062	39	10	-	-	PUNCT
bam-6062	39	11	c	c	NOUN
bam-6062	39	12	at	at	ADP
bam-6062	39	13	the	the	DET
bam-6062	39	14	distal	distal	ADJ
bam-6062	39	15	end	end	NOUN
bam-6062	39	16	from	from	ADP
bam-6062	39	17	the	the	DET
bam-6062	39	18	interconnection	interconnection	NOUN
bam-6062	39	19	contact	contact	NOUN
bam-6062	39	20	pad	pad	NOUN
bam-6062	39	21	and	and	CCONJ
bam-6062	39	22	also	also	ADV
bam-6062	39	23	to	to	PART
bam-6062	39	24	cut	cut	VERB
bam-6062	39	25	the	the	DET
bam-6062	39	26	perimeter	perimeter	NOUN
bam-6062	39	27	of	of	ADP
bam-6062	39	28	the	the	DET
bam-6062	39	29	array	array	NOUN
bam-6062	39	30	.	.	PUNCT
bam-6062	40	1	reference	reference	NOUN
bam-6062	40	2	electrodes	electrode	VERB
bam-6062	40	3	with	with	ADP
bam-6062	40	4	no	no	DET
bam-6062	40	5	carbon	carbon	NOUN
bam-6062	40	6	coating	coating	NOUN
bam-6062	40	7	were	be	AUX
bam-6062	40	8	produced	produce	VERB
bam-6062	40	9	by	by	ADP
bam-6062	40	10	cutting	cut	VERB
bam-6062	40	11	the	the	DET
bam-6062	40	12	perimeter	perimeter	NOUN
bam-6062	40	13	of	of	ADP
bam-6062	40	14	the	the	DET
bam-6062	40	15	electrode	electrode	NOUN
bam-6062	40	16	site	site	NOUN
bam-6062	40	17	and	and	CCONJ
bam-6062	40	18	peeling	peel	VERB
bam-6062	40	19	off	off	ADP
bam-6062	40	20	excess	excess	ADJ
bam-6062	40	21	material	material	NOUN
bam-6062	40	22	from	from	ADP
bam-6062	40	23	the	the	DET
bam-6062	40	24	surface	surface	NOUN
bam-6062	40	25	.	.	PUNCT
bam-6062	41	1	lastly	lastly	ADV
bam-6062	41	2	,	,	PUNCT
bam-6062	41	3	the	the	DET
bam-6062	41	4	electrode	electrode	NOUN
bam-6062	41	5	was	be	AUX
bam-6062	41	6	peeled	peel	VERB
bam-6062	41	7	off	off	ADP
bam-6062	41	8	the	the	DET
bam-6062	41	9	release	release	NOUN
bam-6062	41	10	layer	layer	NOUN
bam-6062	41	11	.	.	PUNCT
bam-6062	42	1	(	(	PUNCT
bam-6062	42	2	fig.1.hi	fig.1.hi	PROPN
bam-6062	42	3	)	)	PUNCT
bam-6062	42	4	.	.	PUNCT
bam-6062	43	1	the	the	DET
bam-6062	43	2	used	used	ADJ
bam-6062	43	3	laser	laser	NOUN
bam-6062	43	4	was	be	AUX
bam-6062	43	5	an	an	DET
bam-6062	43	6	infrared	infrared	ADJ
bam-6062	43	7	nanosecond	nanosecond	NOUN
bam-6062	43	8	(	(	PUNCT
bam-6062	43	9	pulse	pulse	NOUN
bam-6062	43	10	width	width	NOUN
bam-6062	43	11	of	of	ADP
bam-6062	43	12	30	30	NUM
bam-6062	43	13	to	to	PART
bam-6062	43	14	90	90	NUM
bam-6062	43	15	ns	ns	NUM
bam-6062	43	16	)	)	PUNCT
bam-6062	43	17	with	with	ADP
bam-6062	43	18	wavelength	wavelength	NOUN
bam-6062	43	19	of	of	ADP
bam-6062	43	20	1064	1064	NUM
bam-6062	43	21	nm	nm	NOUN
bam-6062	43	22	.	.	PUNCT
bam-6062	44	1	therefore	therefore	ADV
bam-6062	44	2	the	the	DET
bam-6062	44	3	interaction	interaction	NOUN
bam-6062	44	4	with	with	ADP
bam-6062	44	5	the	the	DET
bam-6062	44	6	materials	material	NOUN
bam-6062	44	7	was	be	AUX
bam-6062	44	8	predominantly	predominantly	ADV
bam-6062	44	9	of	of	ADP
bam-6062	44	10	thermal	thermal	ADJ
bam-6062	44	11	nature	nature	NOUN
bam-6062	44	12	.	.	PUNCT
bam-6062	45	1	12	12	NUM
bam-6062	45	2	in	in	ADP
bam-6062	45	3	order	order	NOUN
bam-6062	45	4	to	to	PART
bam-6062	45	5	avoid	avoid	VERB
bam-6062	45	6	burning	burn	VERB
bam-6062	45	7	of	of	ADP
bam-6062	45	8	the	the	DET
bam-6062	45	9	material	material	NOUN
bam-6062	45	10	,	,	PUNCT
bam-6062	45	11	all	all	DET
bam-6062	45	12	experiments	experiment	NOUN
bam-6062	45	13	were	be	AUX
bam-6062	45	14	performed	perform	VERB
bam-6062	45	15	in	in	ADP
bam-6062	45	16	saturated	saturated	ADJ
bam-6062	45	17	n2	n2	ADJ
bam-6062	45	18	environment	environment	NOUN
bam-6062	45	19	.	.	PUNCT
bam-6062	46	1	the	the	DET
bam-6062	46	2	usage	usage	NOUN
bam-6062	46	3	of	of	ADP
bam-6062	46	4	laser	laser	NOUN
bam-6062	46	5	causes	cause	VERB
bam-6062	46	6	the	the	DET
bam-6062	46	7	material	material	NOUN
bam-6062	46	8	to	to	PART
bam-6062	46	9	reach	reach	VERB
bam-6062	46	10	a	a	DET
bam-6062	46	11	certain	certain	ADJ
bam-6062	46	12	temperature	temperature	NOUN
bam-6062	46	13	in	in	ADP
bam-6062	46	14	which	which	PRON
bam-6062	46	15	volatile	volatile	ADJ
bam-6062	46	16	elements	element	NOUN
bam-6062	46	17	are	be	AUX
bam-6062	46	18	removed	remove	VERB
bam-6062	46	19	,	,	PUNCT
bam-6062	46	20	new	new	ADJ
bam-6062	46	21	c	c	NOUN
bam-6062	46	22	-	-	PUNCT
bam-6062	46	23	c	c	NOUN
bam-6062	46	24	bonds	bond	NOUN
bam-6062	46	25	are	be	AUX
bam-6062	46	26	formed	form	VERB
bam-6062	46	27	and	and	CCONJ
bam-6062	46	28	hence	hence	ADV
bam-6062	46	29	,	,	PUNCT
bam-6062	46	30	the	the	DET
bam-6062	46	31	polymer	polymer	NOUN
bam-6062	46	32	pyrolysis	pyrolysis	NOUN
bam-6062	46	33	can	can	AUX
bam-6062	46	34	be	be	AUX
bam-6062	46	35	realized	realize	VERB
bam-6062	46	36	.	.	PUNCT
bam-6062	47	1	6	6	NUM
bam-6062	47	2	since	since	SCONJ
bam-6062	47	3	the	the	DET
bam-6062	47	4	plasma	plasma	NOUN
bam-6062	47	5	temperature	temperature	NOUN
bam-6062	47	6	at	at	ADP
bam-6062	47	7	the	the	DET
bam-6062	47	8	laser	laser	NOUN
bam-6062	47	9	focus	focus	NOUN
bam-6062	47	10	point	point	NOUN
bam-6062	47	11	(	(	PUNCT
bam-6062	47	12	35	35	NUM
bam-6062	47	13	µm	µm	NOUN
bam-6062	47	14	in	in	ADP
bam-6062	47	15	diameter	diameter	NOUN
bam-6062	47	16	)	)	PUNCT
bam-6062	47	17	is	be	AUX
bam-6062	47	18	influenced	influence	VERB
bam-6062	47	19	by	by	ADP
bam-6062	47	20	the	the	DET
bam-6062	47	21	material	material	NOUN
bam-6062	47	22	characteristics	characteristic	NOUN
bam-6062	47	23	,	,	PUNCT
bam-6062	47	24	laser	laser	NOUN
bam-6062	47	25	parameters	parameter	NOUN
bam-6062	47	26	and	and	CCONJ
bam-6062	47	27	environmental	environmental	ADJ
bam-6062	47	28	conditions	condition	NOUN
bam-6062	47	29	,	,	PUNCT
bam-6062	47	30	13	13	NUM
bam-6062	47	31	a	a	DET
bam-6062	47	32	scope	scope	NOUN
bam-6062	47	33	of	of	ADP
bam-6062	47	34	laser	laser	NOUN
bam-6062	47	35	parameters	parameter	NOUN
bam-6062	47	36	to	to	PART
bam-6062	47	37	generate	generate	VERB
bam-6062	47	38	carbon	carbon	NOUN
bam-6062	47	39	electrodes	electrode	NOUN
bam-6062	47	40	was	be	AUX
bam-6062	47	41	studied	study	VERB
bam-6062	47	42	.	.	PUNCT
bam-6062	48	1	the	the	DET
bam-6062	48	2	laser	laser	NOUN
bam-6062	48	3	parameters	parameter	NOUN
bam-6062	48	4	have	have	VERB
bam-6062	48	5	especially	especially	ADV
bam-6062	48	6	high	high	ADJ
bam-6062	48	7	influence	influence	NOUN
bam-6062	48	8	on	on	ADP
bam-6062	48	9	the	the	DET
bam-6062	48	10	power	power	NOUN
bam-6062	48	11	density	density	NOUN
bam-6062	48	12	reaching	reach	VERB
bam-6062	48	13	the	the	DET
bam-6062	48	14	sample	sample	NOUN
bam-6062	48	15	and	and	CCONJ
bam-6062	48	16	therefore	therefore	ADV
bam-6062	48	17	in	in	ADP
bam-6062	48	18	the	the	DET
bam-6062	48	19	generation	generation	NOUN
bam-6062	48	20	of	of	ADP
bam-6062	48	21	the	the	DET
bam-6062	48	22	desired	desire	VERB
bam-6062	48	23	material	material	NOUN
bam-6062	48	24	.	.	PUNCT
bam-6062	49	1	9	9	NUM
bam-6062	49	2	the	the	DET
bam-6062	49	3	best	good	ADJ
bam-6062	49	4	combination	combination	NOUN
bam-6062	49	5	of	of	ADP
bam-6062	49	6	laser	laser	NOUN
bam-6062	49	7	parameters	parameter	NOUN
bam-6062	49	8	i.e.	i.e.	X
bam-6062	49	9	power	power	NOUN
bam-6062	49	10	,	,	PUNCT
bam-6062	49	11	frequency	frequency	NOUN
bam-6062	49	12	,	,	PUNCT
bam-6062	49	13	speed	speed	NOUN
bam-6062	49	14	and	and	CCONJ
bam-6062	49	15	pulse	pulse	NOUN
bam-6062	49	16	duration	duration	NOUN
bam-6062	49	17	,	,	PUNCT
bam-6062	49	18	was	be	AUX
bam-6062	49	19	used	use	VERB
bam-6062	49	20	to	to	PART
bam-6062	49	21	produce	produce	VERB
bam-6062	49	22	an	an	DET
bam-6062	49	23	electrode	electrode	NOUN
bam-6062	49	24	active	active	ADJ
bam-6062	49	25	site	site	NOUN
bam-6062	49	26	of	of	ADP
bam-6062	49	27	700	700	NUM
bam-6062	49	28	µm	µm	NOUN
bam-6062	49	29	in	in	ADP
bam-6062	49	30	diameter	diameter	NOUN
bam-6062	49	31	.	.	PUNCT
bam-6062	50	1	all	all	DET
bam-6062	50	2	materials	material	NOUN
bam-6062	50	3	used	use	VERB
bam-6062	50	4	to	to	PART
bam-6062	50	5	fabricate	fabricate	VERB
bam-6062	50	6	the	the	DET
bam-6062	50	7	samples	sample	NOUN
bam-6062	50	8	were	be	AUX
bam-6062	50	9	biocompatible	biocompatible	ADJ
bam-6062	50	10	and	and	CCONJ
bam-6062	50	11	medical	medical	ADJ
bam-6062	50	12	grade	grade	NOUN
bam-6062	50	13	.	.	PUNCT
bam-6062	51	1	composition	composition	NOUN
bam-6062	51	2	of	of	ADP
bam-6062	51	3	electrodes	electrode	NOUN
bam-6062	51	4	composition	composition	NOUN
bam-6062	51	5	analysis	analysis	NOUN
bam-6062	51	6	of	of	ADP
bam-6062	51	7	the	the	DET
bam-6062	51	8	carbonized	carbonize	VERB
bam-6062	51	9	electrodes	electrode	NOUN
bam-6062	51	10	was	be	AUX
bam-6062	51	11	done	do	VERB
bam-6062	51	12	using	use	VERB
bam-6062	51	13	x	x	PROPN
bam-6062	51	14	-	-	NOUN
bam-6062	51	15	ray	ray	NOUN
bam-6062	51	16	photoelectron	photoelectron	NOUN
bam-6062	51	17	spectroscopy	spectroscopy	NOUN
bam-6062	51	18	(	(	PUNCT
bam-6062	51	19	xps	xps	PROPN
bam-6062	51	20	)	)	PUNCT
bam-6062	51	21	.	.	PUNCT
bam-6062	52	1	the	the	DET
bam-6062	52	2	measurements	measurement	NOUN
bam-6062	52	3	were	be	AUX
bam-6062	52	4	performed	perform	VERB
bam-6062	52	5	using	use	VERB
bam-6062	52	6	a	a	DET
bam-6062	52	7	k	k	NOUN
bam-6062	52	8	-	-	PUNCT
bam-6062	52	9	alpha+	alpha+	X
bam-6062	52	10	xps	xps	PROPN
bam-6062	52	11	spectrometer	spectrometer	NOUN
bam-6062	52	12	(	(	PUNCT
bam-6062	52	13	thermo	thermo	NOUN
bam-6062	52	14	fisher	fisher	PROPN
bam-6062	52	15	scientific	scientific	PROPN
bam-6062	52	16	,	,	PUNCT
bam-6062	52	17	east	east	NOUN
bam-6062	52	18	grinstead	grinstead	NOUN
bam-6062	52	19	,	,	PUNCT
bam-6062	52	20	uk	uk	PROPN
bam-6062	52	21	)	)	PUNCT
bam-6062	52	22	.	.	PUNCT
bam-6062	53	1	data	datum	NOUN
bam-6062	53	2	acquisition	acquisition	NOUN
bam-6062	53	3	and	and	CCONJ
bam-6062	53	4	processing	processing	NOUN
bam-6062	53	5	using	use	VERB
bam-6062	53	6	the	the	DET
bam-6062	53	7	thermo	thermo	NOUN
bam-6062	53	8	avantage	avantage	NOUN
bam-6062	53	9	software	software	NOUN
bam-6062	53	10	is	be	AUX
bam-6062	53	11	described	describe	VERB
bam-6062	53	12	elsewhere	elsewhere	ADV
bam-6062	53	13	.	.	PUNCT
bam-6062	54	1	14	14	NUM
bam-6062	54	2	the	the	DET
bam-6062	54	3	sample	sample	NOUN
bam-6062	54	4	was	be	AUX
bam-6062	54	5	analyzed	analyze	VERB
bam-6062	54	6	using	use	VERB
bam-6062	54	7	a	a	DET
bam-6062	54	8	microfocused	microfocuse	VERB
bam-6062	54	9	,	,	PUNCT
bam-6062	54	10	monochromated	monochromate	VERB
bam-6062	54	11	al	al	PROPN
bam-6062	54	12	kα	kα	PROPN
bam-6062	54	13	x	x	PROPN
bam-6062	54	14	-	-	NOUN
bam-6062	54	15	ray	ray	NOUN
bam-6062	54	16	source	source	NOUN
bam-6062	54	17	(	(	PUNCT
bam-6062	54	18	30	30	NUM
bam-6062	54	19	-	-	SYM
bam-6062	54	20	400	400	NUM
bam-6062	54	21	µm	µm	ADP
bam-6062	54	22	spot	spot	NOUN
bam-6062	54	23	size	size	NOUN
bam-6062	54	24	)	)	PUNCT
bam-6062	54	25	.	.	PUNCT
bam-6062	55	1	the	the	DET
bam-6062	55	2	spectra	spectra	NOUN
bam-6062	55	3	were	be	AUX
bam-6062	55	4	fitted	fit	VERB
bam-6062	55	5	with	with	ADP
bam-6062	55	6	one	one	NUM
bam-6062	55	7	or	or	CCONJ
bam-6062	55	8	more	more	ADJ
bam-6062	55	9	voigt	voigt	PROPN
bam-6062	55	10	profiles	profile	NOUN
bam-6062	55	11	(	(	PUNCT
bam-6062	55	12	binding	bind	VERB
bam-6062	55	13	energy	energy	NOUN
bam-6062	55	14	uncertainty	uncertainty	NOUN
bam-6062	55	15	:	:	PUNCT
bam-6062	55	16	+	+	ADJ
bam-6062	55	17	/0.2	/0.2	PROPN
bam-6062	55	18	ev	ev	NOUN
bam-6062	55	19	)	)	PUNCT
bam-6062	55	20	.	.	PUNCT
bam-6062	56	1	the	the	DET
bam-6062	56	2	analyzer	analyzer	PROPN
bam-6062	56	3	transmission	transmission	NOUN
bam-6062	56	4	function	function	NOUN
bam-6062	56	5	,	,	PUNCT
bam-6062	56	6	scofield	scofield	PROPN
bam-6062	56	7	sensitivity	sensitivity	PROPN
bam-6062	56	8	fig	fig	PROPN
bam-6062	56	9	1	1	NUM
bam-6062	56	10	.	.	PUNCT
bam-6062	57	1	cross	cross	ADJ
bam-6062	57	2	-	-	ADJ
bam-6062	57	3	section	section	ADJ
bam-6062	57	4	schematic	schematic	ADJ
bam-6062	57	5	of	of	ADP
bam-6062	57	6	the	the	DET
bam-6062	57	7	array	array	NOUN
bam-6062	57	8	process	process	NOUN
bam-6062	57	9	fabrication	fabrication	NOUN
bam-6062	57	10	:	:	PUNCT
bam-6062	57	11	a	a	X
bam-6062	57	12	)	)	PUNCT
bam-6062	57	13	lamination	lamination	NOUN
bam-6062	57	14	of	of	ADP
bam-6062	57	15	the	the	DET
bam-6062	57	16	release	release	NOUN
bam-6062	57	17	layer	layer	NOUN
bam-6062	57	18	;	;	PUNCT
bam-6062	57	19	b	b	X
bam-6062	57	20	)	)	PUNCT
bam-6062	57	21	spin	spin	VERB
bam-6062	57	22	coat	coat	NOUN
bam-6062	57	23	pdms	pdms	NOUN
bam-6062	57	24	;	;	PUNCT
bam-6062	57	25	c	c	X
bam-6062	57	26	)	)	PUNCT
bam-6062	57	27	lamination	lamination	NOUN
bam-6062	57	28	of	of	ADP
bam-6062	57	29	the	the	DET
bam-6062	57	30	metal	metal	NOUN
bam-6062	57	31	;	;	PUNCT
bam-6062	57	32	d	d	X
bam-6062	57	33	)	)	PUNCT
bam-6062	57	34	laser	laser	NOUN
bam-6062	57	35	structuring	structuring	NOUN
bam-6062	57	36	of	of	ADP
bam-6062	57	37	the	the	DET
bam-6062	57	38	metal	metal	NOUN
bam-6062	57	39	;	;	PUNCT
bam-6062	57	40	e	e	X
bam-6062	57	41	)	)	PUNCT
bam-6062	57	42	removal	removal	NOUN
bam-6062	57	43	of	of	ADP
bam-6062	57	44	metal	metal	NOUN
bam-6062	57	45	excess	excess	NOUN
bam-6062	57	46	;	;	PUNCT
bam-6062	57	47	f	f	X
bam-6062	57	48	)	)	PUNCT
bam-6062	57	49	parylene	parylene	NOUN
bam-6062	57	50	-	-	PUNCT
bam-6062	57	51	c	c	NOUN
bam-6062	57	52	deposition	deposition	NOUN
bam-6062	57	53	;	;	PUNCT
bam-6062	57	54	g	g	NOUN
bam-6062	57	55	)	)	PUNCT
bam-6062	57	56	laser	laser	NOUN
bam-6062	57	57	pyrolysis	pyrolysis	NOUN
bam-6062	57	58	;	;	PUNCT
bam-6062	57	59	h	h	X
bam-6062	57	60	)	)	PUNCT
bam-6062	57	61	contact	contact	NOUN
bam-6062	57	62	opening	opening	NOUN
bam-6062	57	63	and	and	CCONJ
bam-6062	57	64	cut	cut	NOUN
bam-6062	57	65	of	of	ADP
bam-6062	57	66	the	the	DET
bam-6062	57	67	electrode	electrode	NOUN
bam-6062	57	68	borders	border	NOUN
bam-6062	57	69	;	;	PUNCT
bam-6062	57	70	i	i	PRON
bam-6062	57	71	)	)	PUNCT
bam-6062	57	72	electrode	electrode	NOUN
bam-6062	57	73	peel	peel	NOUN
bam-6062	57	74	off	off	ADP
bam-6062	57	75	.	.	PUNCT
bam-6062	58	1	fig	fig	NOUN
bam-6062	58	2	2	2	NUM
bam-6062	58	3	.	.	PUNCT
bam-6062	58	4	setup	setup	NOUN
bam-6062	58	5	used	use	VERB
bam-6062	58	6	to	to	PART
bam-6062	58	7	achieve	achieve	VERB
bam-6062	58	8	a	a	DET
bam-6062	58	9	conductance	conductance	NOUN
bam-6062	58	10	approximation	approximation	NOUN
bam-6062	58	11	.	.	PUNCT
bam-6062	59	1	electrode	electrode	VERB
bam-6062	59	2	active	active	ADJ
bam-6062	59	3	site	site	NOUN
bam-6062	59	4	(	(	PUNCT
bam-6062	59	5	left	left	ADJ
bam-6062	59	6	)	)	PUNCT
bam-6062	59	7	and	and	CCONJ
bam-6062	59	8	contact	contact	NOUN
bam-6062	59	9	pad	pad	NOUN
bam-6062	59	10	(	(	PUNCT
bam-6062	59	11	right	right	ADJ
bam-6062	59	12	)	)	PUNCT
bam-6062	59	13	are	be	AUX
bam-6062	59	14	connected	connect	VERB
bam-6062	59	15	via	via	ADP
bam-6062	59	16	an	an	DET
bam-6062	59	17	insulated	insulated	ADJ
bam-6062	59	18	metal	metal	NOUN
bam-6062	59	19	line	line	NOUN
bam-6062	59	20	under	under	ADP
bam-6062	59	21	the	the	DET
bam-6062	59	22	top	top	ADJ
bam-6062	59	23	layer	layer	NOUN
bam-6062	59	24	(	(	PUNCT
bam-6062	59	25	not	not	PART
bam-6062	59	26	shown	show	VERB
bam-6062	59	27	in	in	ADP
bam-6062	59	28	the	the	DET
bam-6062	59	29	graph	graph	NOUN
bam-6062	59	30	)	)	PUNCT
bam-6062	59	31	.	.	PUNCT
bam-6062	60	1	laser	laser	NOUN
bam-6062	60	2	-	-	PUNCT
bam-6062	60	3	induced	induce	VERB
bam-6062	60	4	carbon	carbon	NOUN
bam-6062	60	5	pyrolysis	pyrolysis	NOUN
bam-6062	60	6	of	of	ADP
bam-6062	60	7	electrodes	electrode	NOUN
bam-6062	60	8	for	for	ADP
bam-6062	60	9	neural	neural	ADJ
bam-6062	60	10	interface	interface	NOUN
bam-6062	60	11	systems	system	NOUN
bam-6062	60	12	eur	eur	PROPN
bam-6062	60	13	j	j	PROPN
bam-6062	60	14	transl	transl	PROPN
bam-6062	60	15	myol	myol	NOUN
bam-6062	60	16	26	26	NUM
bam-6062	60	17	(	(	PUNCT
bam-6062	60	18	3	3	NUM
bam-6062	60	19	):	):	PUNCT
bam-6062	60	20	181	181	NUM
bam-6062	60	21	-	-	SYM
bam-6062	60	22	186	186	NUM
bam-6062	60	23	183	183	NUM
bam-6062	60	24	factors	factor	NOUN
bam-6062	60	25	15	15	NUM
bam-6062	60	26	and	and	CCONJ
bam-6062	60	27	effective	effective	ADJ
bam-6062	60	28	attenuation	attenuation	NOUN
bam-6062	60	29	lengths	length	NOUN
bam-6062	60	30	(	(	PUNCT
bam-6062	60	31	eals	eal	NOUN
bam-6062	60	32	)	)	PUNCT
bam-6062	60	33	for	for	ADP
bam-6062	60	34	photoelectrons	photoelectron	NOUN
bam-6062	60	35	were	be	AUX
bam-6062	60	36	applied	apply	VERB
bam-6062	60	37	for	for	ADP
bam-6062	60	38	quantification	quantification	NOUN
bam-6062	60	39	.	.	PUNCT
bam-6062	61	1	eals	eal	NOUN
bam-6062	61	2	were	be	AUX
bam-6062	61	3	calculated	calculate	VERB
bam-6062	61	4	using	use	VERB
bam-6062	61	5	the	the	DET
bam-6062	61	6	standard	standard	NOUN
bam-6062	61	7	tpp-2	tpp-2	NOUN
bam-6062	61	8	m	m	PART
bam-6062	61	9	formalism	formalism	NOUN
bam-6062	61	10	.	.	PUNCT
bam-6062	62	1	16	16	NUM
bam-6062	62	2	all	all	DET
bam-6062	62	3	spectra	spectra	NOUN
bam-6062	62	4	were	be	AUX
bam-6062	62	5	referenced	reference	VERB
bam-6062	62	6	to	to	ADP
bam-6062	62	7	the	the	DET
bam-6062	62	8	c1s	c1s	PROPN
bam-6062	62	9	peak	peak	NOUN
bam-6062	62	10	of	of	ADP
bam-6062	62	11	hydrocarbon	hydrocarbon	NOUN
bam-6062	62	12	at	at	ADP
bam-6062	62	13	285.0	285.0	NUM
bam-6062	62	14	ev	ev	ADP
bam-6062	62	15	binding	bind	VERB
bam-6062	62	16	energy	energy	NOUN
bam-6062	62	17	controlled	control	VERB
bam-6062	62	18	by	by	ADP
bam-6062	62	19	means	mean	NOUN
bam-6062	62	20	of	of	ADP
bam-6062	62	21	the	the	DET
bam-6062	62	22	well	well	ADV
bam-6062	62	23	-	-	PUNCT
bam-6062	62	24	known	know	VERB
bam-6062	62	25	photoelectron	photoelectron	NOUN
bam-6062	62	26	peaks	peak	NOUN
bam-6062	62	27	of	of	ADP
bam-6062	62	28	metallic	metallic	PROPN
bam-6062	62	29	cu	cu	PROPN
bam-6062	62	30	,	,	PUNCT
bam-6062	62	31	ag	ag	PROPN
bam-6062	62	32	,	,	PUNCT
bam-6062	62	33	and	and	CCONJ
bam-6062	62	34	au	au	PROPN
bam-6062	62	35	.	.	PROPN
bam-6062	62	36	prior	prior	ADV
bam-6062	62	37	to	to	ADP
bam-6062	62	38	spectral	spectral	ADJ
bam-6062	62	39	measurements	measurement	NOUN
bam-6062	62	40	the	the	DET
bam-6062	62	41	samples	sample	NOUN
bam-6062	63	1	were	be	AUX
bam-6062	63	2	sputter	sputter	VERB
bam-6062	63	3	cleaned	clean	VERB
bam-6062	63	4	using	use	VERB
bam-6062	63	5	an	an	DET
bam-6062	63	6	ar1000	ar1000	ADJ
bam-6062	63	7	+	+	SYM
bam-6062	63	8	cluster	cluster	NOUN
bam-6062	63	9	ion	ion	NOUN
bam-6062	63	10	beam	beam	NOUN
bam-6062	63	11	at	at	ADP
bam-6062	63	12	8	8	NUM
bam-6062	63	13	kev	kev	NOUN
bam-6062	63	14	and	and	CCONJ
bam-6062	63	15	30	30	NUM
bam-6062	63	16	°	°	NUM
bam-6062	63	17	angle	angle	NOUN
bam-6062	63	18	of	of	ADP
bam-6062	63	19	incidence	incidence	NOUN
bam-6062	63	20	which	which	PRON
bam-6062	63	21	did	do	AUX
bam-6062	63	22	not	not	PART
bam-6062	63	23	harm	harm	VERB
bam-6062	63	24	the	the	DET
bam-6062	63	25	arrays	array	NOUN
bam-6062	63	26	.	.	PUNCT
bam-6062	64	1	conductance	conductance	NOUN
bam-6062	64	2	test	test	NOUN
bam-6062	64	3	in	in	ADP
bam-6062	64	4	order	order	NOUN
bam-6062	64	5	to	to	PART
bam-6062	64	6	have	have	AUX
bam-6062	64	7	an	an	DET
bam-6062	64	8	estimation	estimation	NOUN
bam-6062	64	9	of	of	ADP
bam-6062	64	10	the	the	DET
bam-6062	64	11	conductance	conductance	NOUN
bam-6062	64	12	(	(	PUNCT
bam-6062	64	13	𝜎	𝜎	NOUN
bam-6062	64	14	)	)	PUNCT
bam-6062	64	15	of	of	ADP
bam-6062	64	16	the	the	DET
bam-6062	64	17	pyrolyzed	pyrolyzed	ADJ
bam-6062	64	18	material	material	NOUN
bam-6062	64	19	the	the	DET
bam-6062	64	20	resistance	resistance	NOUN
bam-6062	64	21	(	(	PUNCT
bam-6062	64	22	𝜌	𝜌	NOUN
bam-6062	64	23	)	)	PUNCT
bam-6062	64	24	was	be	AUX
bam-6062	64	25	measure	measure	NOUN
bam-6062	64	26	according	accord	VERB
bam-6062	64	27	to	to	ADP
bam-6062	64	28	eq.1	eq.1	PROPN
bam-6062	64	29	.	.	PUNCT
bam-6062	65	1	𝜎	𝜎	X
bam-6062	65	2	=	=	SYM
bam-6062	65	3	1	1	NUM
bam-6062	65	4	𝜌	𝜌	X
bam-6062	65	5	(	(	PUNCT
bam-6062	65	6	1	1	X
bam-6062	65	7	)	)	PUNCT
bam-6062	65	8	the	the	DET
bam-6062	65	9	measurements	measurement	NOUN
bam-6062	65	10	(	(	PUNCT
bam-6062	65	11	n=10	n=10	NOUN
bam-6062	65	12	)	)	PUNCT
bam-6062	65	13	were	be	AUX
bam-6062	65	14	taken	take	VERB
bam-6062	65	15	at	at	ADP
bam-6062	65	16	different	different	ADJ
bam-6062	65	17	positions	position	NOUN
bam-6062	65	18	(	(	PUNCT
bam-6062	65	19	a	a	PRON
bam-6062	65	20	,	,	PUNCT
bam-6062	65	21	b	b	PROPN
bam-6062	65	22	and	and	CCONJ
bam-6062	65	23	c	c	NOUN
bam-6062	65	24	)	)	PUNCT
bam-6062	65	25	versus	versus	ADP
bam-6062	65	26	an	an	DET
bam-6062	65	27	origin	origin	NOUN
bam-6062	65	28	point	point	NOUN
bam-6062	65	29	(	(	PUNCT
bam-6062	65	30	0	0	X
bam-6062	65	31	)	)	PUNCT
bam-6062	65	32	using	use	VERB
bam-6062	65	33	an	an	DET
bam-6062	65	34	ohmmeter	ohmmeter	NOUN
bam-6062	65	35	(	(	PUNCT
bam-6062	65	36	34401a	34401a	NUM
bam-6062	65	37	6	6	NUM
bam-6062	65	38	1/2	1/2	NUM
bam-6062	65	39	digit	digit	NOUN
bam-6062	65	40	multimeter	multimeter	NOUN
bam-6062	65	41	,	,	PUNCT
bam-6062	65	42	agilent	agilent	PROPN
bam-6062	65	43	)	)	PUNCT
bam-6062	65	44	with	with	ADP
bam-6062	65	45	two	two	NUM
bam-6062	65	46	microneedles	microneedle	NOUN
bam-6062	65	47	(	(	PUNCT
bam-6062	65	48	see	see	VERB
bam-6062	65	49	fig.2	fig.2	PROPN
bam-6062	65	50	)	)	PUNCT
bam-6062	65	51	.	.	PUNCT
bam-6062	66	1	special	special	ADJ
bam-6062	66	2	care	care	NOUN
bam-6062	66	3	was	be	AUX
bam-6062	66	4	taken	take	VERB
bam-6062	66	5	when	when	SCONJ
bam-6062	66	6	placing	place	VERB
bam-6062	66	7	the	the	DET
bam-6062	66	8	needles	needle	NOUN
bam-6062	66	9	to	to	PART
bam-6062	66	10	ensure	ensure	VERB
bam-6062	66	11	minimal	minimal	ADJ
bam-6062	66	12	scratching	scratching	NOUN
bam-6062	66	13	of	of	ADP
bam-6062	66	14	the	the	DET
bam-6062	66	15	surface	surface	NOUN
bam-6062	66	16	.	.	PUNCT
bam-6062	67	1	the	the	DET
bam-6062	67	2	distance	distance	NOUN
bam-6062	67	3	between	between	ADP
bam-6062	67	4	the	the	DET
bam-6062	67	5	origin	origin	NOUN
bam-6062	67	6	point	point	NOUN
bam-6062	67	7	and	and	CCONJ
bam-6062	67	8	the	the	DET
bam-6062	67	9	a	a	NOUN
bam-6062	67	10	,	,	PUNCT
bam-6062	67	11	b	b	PROPN
bam-6062	67	12	and	and	CCONJ
bam-6062	67	13	c	c	PROPN
bam-6062	67	14	point	point	NOUN
bam-6062	67	15	was	be	AUX
bam-6062	67	16	approximately	approximately	ADV
bam-6062	67	17	0.3	0.3	NUM
bam-6062	67	18	,	,	PUNCT
bam-6062	67	19	0.6	0.6	NUM
bam-6062	67	20	and	and	CCONJ
bam-6062	67	21	10	10	NUM
bam-6062	67	22	mm	mm	NOUN
bam-6062	67	23	,	,	PUNCT
bam-6062	67	24	respectively	respectively	ADV
bam-6062	67	25	.	.	PUNCT
bam-6062	68	1	here	here	ADV
bam-6062	68	2	a	a	PRON
bam-6062	68	3	and	and	CCONJ
bam-6062	68	4	b	b	NOUN
bam-6062	68	5	were	be	AUX
bam-6062	68	6	located	locate	VERB
bam-6062	68	7	inside	inside	ADP
bam-6062	68	8	the	the	DET
bam-6062	68	9	pyrolyzed	pyrolyzed	ADJ
bam-6062	68	10	area	area	NOUN
bam-6062	68	11	and	and	CCONJ
bam-6062	68	12	point	point	NOUN
bam-6062	68	13	c	c	PROPN
bam-6062	68	14	was	be	AUX
bam-6062	68	15	found	find	VERB
bam-6062	68	16	at	at	ADP
bam-6062	68	17	the	the	DET
bam-6062	68	18	electrode	electrode	NOUN
bam-6062	68	19	contact	contact	NOUN
bam-6062	68	20	.	.	PUNCT
bam-6062	69	1	electrochemical	electrochemical	ADJ
bam-6062	69	2	characterization	characterization	NOUN
bam-6062	69	3	electrochemical	electrochemical	ADJ
bam-6062	69	4	characterization	characterization	NOUN
bam-6062	69	5	of	of	ADP
bam-6062	69	6	the	the	DET
bam-6062	69	7	fabricated	fabricate	VERB
bam-6062	69	8	electrodes	electrode	NOUN
bam-6062	69	9	was	be	AUX
bam-6062	69	10	addressed	address	VERB
bam-6062	69	11	using	use	VERB
bam-6062	69	12	electrochemical	electrochemical	ADJ
bam-6062	69	13	impedance	impedance	NOUN
bam-6062	69	14	spectroscopy	spectroscopy	NOUN
bam-6062	69	15	(	(	PUNCT
bam-6062	69	16	eis	eis	NOUN
bam-6062	69	17	)	)	PUNCT
bam-6062	69	18	and	and	CCONJ
bam-6062	69	19	cyclic	cyclic	ADJ
bam-6062	69	20	voltammetry	voltammetry	NOUN
bam-6062	69	21	(	(	PUNCT
bam-6062	69	22	cv	cv	PROPN
bam-6062	69	23	)	)	PUNCT
bam-6062	69	24	.	.	PUNCT
bam-6062	70	1	measurements	measurement	NOUN
bam-6062	70	2	were	be	AUX
bam-6062	70	3	performed	perform	VERB
bam-6062	70	4	in	in	ADP
bam-6062	70	5	a	a	DET
bam-6062	70	6	three	three	NUM
bam-6062	70	7	electrode	electrode	NOUN
bam-6062	70	8	setup	setup	NOUN
bam-6062	70	9	with	with	ADP
bam-6062	70	10	a	a	DET
bam-6062	70	11	platinum	platinum	NOUN
bam-6062	70	12	counter	counter	NOUN
bam-6062	70	13	electrode	electrode	NOUN
bam-6062	70	14	and	and	CCONJ
bam-6062	70	15	ag	ag	PROPN
bam-6062	70	16	/	/	SYM
bam-6062	70	17	agcl	agcl	NOUN
bam-6062	70	18	reference	reference	NOUN
bam-6062	70	19	electrode	electrode	NOUN
bam-6062	70	20	.	.	PUNCT
bam-6062	71	1	both	both	PRON
bam-6062	71	2	cv	cv	PROPN
bam-6062	71	3	and	and	CCONJ
bam-6062	71	4	eis	eis	PROPN
bam-6062	71	5	were	be	AUX
bam-6062	71	6	conducted	conduct	VERB
bam-6062	71	7	in	in	ADP
bam-6062	71	8	0.9	0.9	NUM
bam-6062	71	9	%	%	NOUN
bam-6062	71	10	saline	saline	NOUN
bam-6062	71	11	solution	solution	NOUN
bam-6062	71	12	.	.	PUNCT
bam-6062	72	1	electrochemical	electrochemical	ADJ
bam-6062	72	2	interface	interface	NOUN
bam-6062	72	3	was	be	AUX
bam-6062	72	4	provided	provide	VERB
bam-6062	72	5	by	by	ADP
bam-6062	72	6	a	a	DET
bam-6062	72	7	potentiostat	potentiostat	NOUN
bam-6062	72	8	and	and	CCONJ
bam-6062	72	9	a	a	DET
bam-6062	72	10	frequency	frequency	NOUN
bam-6062	72	11	analyzer	analyzer	NOUN
bam-6062	72	12	device	device	NOUN
bam-6062	72	13	(	(	PUNCT
bam-6062	72	14	solartron	solartron	PROPN
bam-6062	72	15	1260&1287	1260&1287	NUM
bam-6062	72	16	by	by	ADP
bam-6062	72	17	solartron	solartron	PROPN
bam-6062	72	18	analytical	analytical	ADJ
bam-6062	72	19	,	,	PUNCT
bam-6062	72	20	farnborough	farnborough	PROPN
bam-6062	72	21	,	,	PUNCT
bam-6062	72	22	hampshire	hampshire	PROPN
bam-6062	72	23	,	,	PUNCT
bam-6062	72	24	uk	uk	PROPN
bam-6062	72	25	)	)	PUNCT
bam-6062	72	26	accompanied	accompany	VERB
bam-6062	72	27	by	by	ADP
bam-6062	72	28	the	the	DET
bam-6062	72	29	software	software	NOUN
bam-6062	72	30	zplot	zplot	NOUN
bam-6062	72	31	(	(	PUNCT
bam-6062	72	32	v2.8	v2.8	PROPN
bam-6062	72	33	by	by	ADP
bam-6062	72	34	scribner	scribner	PROPN
bam-6062	72	35	associates	associates	PROPN
bam-6062	72	36	inc	inc	PROPN
bam-6062	72	37	.	.	PROPN
bam-6062	72	38	,	,	PUNCT
bam-6062	72	39	southern	southern	ADJ
bam-6062	72	40	pines	pine	NOUN
bam-6062	72	41	,	,	PUNCT
bam-6062	72	42	nc	nc	PROPN
bam-6062	72	43	,	,	PUNCT
bam-6062	72	44	usa	usa	PROPN
bam-6062	72	45	)	)	PUNCT
bam-6062	72	46	to	to	PART
bam-6062	72	47	control	control	VERB
bam-6062	72	48	the	the	DET
bam-6062	72	49	setup	setup	NOUN
bam-6062	72	50	,	,	PUNCT
bam-6062	72	51	and	and	CCONJ
bam-6062	72	52	save	save	VERB
bam-6062	72	53	and	and	CCONJ
bam-6062	72	54	analyze	analyze	VERB
bam-6062	72	55	the	the	DET
bam-6062	72	56	data	datum	NOUN
bam-6062	72	57	.	.	PUNCT
bam-6062	73	1	the	the	DET
bam-6062	73	2	eis	eis	PROPN
bam-6062	73	3	measurements	measurement	NOUN
bam-6062	73	4	were	be	AUX
bam-6062	73	5	made	make	VERB
bam-6062	73	6	within	within	ADP
bam-6062	73	7	the	the	DET
bam-6062	73	8	frequency	frequency	NOUN
bam-6062	73	9	range	range	NOUN
bam-6062	73	10	of	of	ADP
bam-6062	73	11	0.1	0.1	NUM
bam-6062	73	12	hz	hz	NOUN
bam-6062	73	13	-1	-1	PUNCT
bam-6062	73	14	mhz	mhz	NOUN
bam-6062	73	15	with	with	ADP
bam-6062	73	16	an	an	DET
bam-6062	73	17	excitation	excitation	NOUN
bam-6062	73	18	amplitude	amplitude	NOUN
bam-6062	73	19	of	of	ADP
bam-6062	73	20	0.5	0.5	NUM
bam-6062	73	21	mv	mv	NOUN
bam-6062	73	22	.	.	PUNCT
bam-6062	74	1	in	in	SCONJ
bam-6062	74	2	order	order	NOUN
bam-6062	74	3	to	to	PART
bam-6062	74	4	run	run	VERB
bam-6062	74	5	cv	cv	NOUN
bam-6062	74	6	measurements	measurement	NOUN
bam-6062	74	7	the	the	DET
bam-6062	74	8	vertex	vertex	NOUN
bam-6062	74	9	potentials	potential	NOUN
bam-6062	74	10	were	be	AUX
bam-6062	74	11	set	set	VERB
bam-6062	74	12	between	between	ADP
bam-6062	74	13	0.6	0.6	NUM
bam-6062	74	14	mv	mv	NOUN
bam-6062	74	15	and	and	CCONJ
bam-6062	74	16	0.8	0.8	NUM
bam-6062	74	17	mv	mv	PROPN
bam-6062	74	18	and	and	CCONJ
bam-6062	74	19	the	the	DET
bam-6062	74	20	working	work	VERB
bam-6062	74	21	electrode	electrode	NOUN
bam-6062	74	22	potential	potential	NOUN
bam-6062	74	23	was	be	AUX
bam-6062	74	24	swept	sweep	VERB
bam-6062	74	25	at	at	ADP
bam-6062	74	26	a	a	DET
bam-6062	74	27	scan	scan	ADJ
bam-6062	74	28	rate	rate	NOUN
bam-6062	74	29	of	of	ADP
bam-6062	74	30	50	50	NUM
bam-6062	74	31	mv	mv	PROPN
bam-6062	74	32	/	/	SYM
bam-6062	74	33	s.	s.	PROPN
bam-6062	74	34	pulse	pulse	PROPN
bam-6062	74	35	test	test	PROPN
bam-6062	74	36	pulse	pulse	PROPN
bam-6062	74	37	test	test	NOUN
bam-6062	74	38	(	(	PUNCT
bam-6062	74	39	voltage	voltage	NOUN
bam-6062	74	40	transient	transient	PROPN
bam-6062	74	41	measurement	measurement	NOUN
bam-6062	74	42	)	)	PUNCT
bam-6062	74	43	was	be	AUX
bam-6062	74	44	used	use	VERB
bam-6062	74	45	to	to	PART
bam-6062	74	46	study	study	VERB
bam-6062	74	47	the	the	DET
bam-6062	74	48	maximum	maximum	ADJ
bam-6062	74	49	polarization	polarization	NOUN
bam-6062	74	50	,	,	PUNCT
bam-6062	74	51	both	both	PRON
bam-6062	74	52	most	most	ADV
bam-6062	74	53	negative	negative	ADJ
bam-6062	74	54	(	(	PUNCT
bam-6062	74	55	emc	emc	PROPN
bam-6062	74	56	)	)	PUNCT
bam-6062	74	57	and	and	CCONJ
bam-6062	74	58	most	most	ADV
bam-6062	74	59	positive	positive	ADJ
bam-6062	74	60	(	(	PUNCT
bam-6062	74	61	ema	ema	PROPN
bam-6062	74	62	)	)	PUNCT
bam-6062	74	63	,	,	PUNCT
bam-6062	74	64	of	of	ADP
bam-6062	74	65	the	the	DET
bam-6062	74	66	electrodeelectrolyte	electrodeelectrolyte	PROPN
bam-6062	74	67	interface	interface	NOUN
bam-6062	74	68	under	under	ADP
bam-6062	74	69	a	a	DET
bam-6062	74	70	current	current	ADJ
bam-6062	74	71	-	-	PUNCT
bam-6062	74	72	controlled	control	VERB
bam-6062	74	73	stimulation	stimulation	NOUN
bam-6062	74	74	pulse	pulse	NOUN
bam-6062	74	75	.	.	PUNCT
bam-6062	75	1	this	this	DET
bam-6062	75	2	test	test	NOUN
bam-6062	75	3	was	be	AUX
bam-6062	75	4	conducted	conduct	VERB
bam-6062	75	5	in	in	ADP
bam-6062	75	6	phosphate	phosphate	ADJ
bam-6062	75	7	buffered	buffer	VERB
bam-6062	75	8	saline	saline	NOUN
bam-6062	75	9	(	(	PUNCT
bam-6062	75	10	pbs	pbs	PROPN
bam-6062	75	11	)	)	PUNCT
bam-6062	75	12	.	.	PUNCT
bam-6062	76	1	the	the	DET
bam-6062	76	2	used	use	VERB
bam-6062	76	3	current	current	ADJ
bam-6062	76	4	pulse	pulse	NOUN
bam-6062	76	5	was	be	AUX
bam-6062	76	6	a	a	DET
bam-6062	76	7	rectangular	rectangular	ADJ
bam-6062	76	8	shaped	shaped	ADJ
bam-6062	76	9	,	,	PUNCT
bam-6062	76	10	symmetrical	symmetrical	ADJ
bam-6062	76	11	,	,	PUNCT
bam-6062	76	12	biphasic	biphasic	ADJ
bam-6062	76	13	,	,	PUNCT
bam-6062	76	14	charge	charge	NOUN
bam-6062	76	15	balanced	balanced	ADJ
bam-6062	76	16	,	,	PUNCT
bam-6062	76	17	negative	negative	ADJ
bam-6062	76	18	phase	phase	NOUN
bam-6062	76	19	first	first	ADJ
bam-6062	76	20	waveform	waveform	NOUN
bam-6062	76	21	.	.	PUNCT
bam-6062	77	1	the	the	DET
bam-6062	77	2	amplitude	amplitude	NOUN
bam-6062	77	3	was	be	AUX
bam-6062	77	4	set	set	VERB
bam-6062	77	5	at	at	ADP
bam-6062	77	6	200	200	NUM
bam-6062	77	7	µa	µa	NOUN
bam-6062	77	8	(	(	PUNCT
bam-6062	77	9	pulse	pulse	NOUN
bam-6062	77	10	width	width	NOUN
bam-6062	77	11	of	of	ADP
bam-6062	77	12	200	200	NUM
bam-6062	77	13	µs	µs	NOUN
bam-6062	77	14	and	and	CCONJ
bam-6062	77	15	the	the	DET
bam-6062	77	16	pulse	pulse	NOUN
bam-6062	77	17	repetition	repetition	NOUN
bam-6062	77	18	frequency	frequency	NOUN
bam-6062	77	19	of	of	ADP
bam-6062	77	20	20	20	NUM
bam-6062	77	21	hz	hz	NOUN
bam-6062	77	22	)	)	PUNCT
bam-6062	77	23	.	.	PUNCT
bam-6062	78	1	results	result	NOUN
bam-6062	78	2	process	process	NOUN
bam-6062	78	3	in	in	ADP
bam-6062	78	4	this	this	DET
bam-6062	78	5	work	work	NOUN
bam-6062	78	6	samples	sample	NOUN
bam-6062	78	7	with	with	ADP
bam-6062	78	8	simple	simple	ADJ
bam-6062	78	9	structure	structure	NOUN
bam-6062	78	10	designs	design	NOUN
bam-6062	78	11	were	be	AUX
bam-6062	78	12	produced	produce	VERB
bam-6062	78	13	as	as	SCONJ
bam-6062	78	14	can	can	AUX
bam-6062	78	15	be	be	AUX
bam-6062	78	16	seen	see	VERB
bam-6062	78	17	in	in	ADP
bam-6062	78	18	(	(	PUNCT
bam-6062	78	19	fig.3.a	fig.3.a	PROPN
bam-6062	78	20	)	)	PUNCT
bam-6062	78	21	.	.	PUNCT
bam-6062	79	1	is	be	AUX
bam-6062	79	2	also	also	ADV
bam-6062	79	3	notable	notable	ADJ
bam-6062	79	4	that	that	SCONJ
bam-6062	79	5	the	the	DET
bam-6062	79	6	using	using	NOUN
bam-6062	79	7	of	of	ADP
bam-6062	79	8	polymers	polymer	NOUN
bam-6062	79	9	provides	provide	VERB
bam-6062	79	10	flexibility	flexibility	NOUN
bam-6062	79	11	,	,	PUNCT
bam-6062	79	12	not	not	PART
bam-6062	79	13	compromising	compromise	VERB
bam-6062	79	14	its	its	PRON
bam-6062	79	15	robustness	robustness	NOUN
bam-6062	79	16	.	.	PUNCT
bam-6062	80	1	through	through	ADP
bam-6062	80	2	optical	optical	ADJ
bam-6062	80	3	inspection	inspection	NOUN
bam-6062	80	4	with	with	ADP
bam-6062	80	5	microscope	microscope	NOUN
bam-6062	80	6	(	(	PUNCT
bam-6062	80	7	leica	leica	PROPN
bam-6062	80	8	dm4000	dm4000	PROPN
bam-6062	80	9	m	m	PROPN
bam-6062	80	10	)	)	PUNCT
bam-6062	80	11	,	,	PUNCT
bam-6062	80	12	the	the	DET
bam-6062	80	13	surface	surface	NOUN
bam-6062	80	14	structure	structure	NOUN
bam-6062	80	15	of	of	ADP
bam-6062	80	16	the	the	DET
bam-6062	80	17	pyrolyzed	pyrolyzed	ADJ
bam-6062	80	18	active	active	ADJ
bam-6062	80	19	site	site	NOUN
bam-6062	80	20	shows	show	VERB
bam-6062	80	21	to	to	PART
bam-6062	80	22	be	be	AUX
bam-6062	80	23	rough	rough	ADJ
bam-6062	80	24	(	(	PUNCT
bam-6062	80	25	fig.3.b	fig.3.b	NUM
bam-6062	80	26	)	)	PUNCT
bam-6062	80	27	.	.	PUNCT
bam-6062	81	1	composition	composition	NOUN
bam-6062	81	2	of	of	ADP
bam-6062	81	3	electrodes	electrode	NOUN
bam-6062	81	4	one	one	NUM
bam-6062	81	5	sample	sample	NOUN
bam-6062	81	6	was	be	AUX
bam-6062	81	7	analyzed	analyze	VERB
bam-6062	81	8	with	with	ADP
bam-6062	81	9	xps	xps	PROPN
bam-6062	81	10	to	to	PART
bam-6062	81	11	reveal	reveal	VERB
bam-6062	81	12	the	the	DET
bam-6062	81	13	chemical	chemical	NOUN
bam-6062	81	14	and	and	CCONJ
bam-6062	81	15	elemental	elemental	ADJ
bam-6062	81	16	composition	composition	NOUN
bam-6062	81	17	of	of	ADP
bam-6062	81	18	the	the	DET
bam-6062	81	19	original	original	ADJ
bam-6062	81	20	insulation	insulation	NOUN
bam-6062	81	21	layer	layer	NOUN
bam-6062	81	22	(	(	PUNCT
bam-6062	81	23	parylene	parylene	NOUN
bam-6062	81	24	-	-	PUNCT
bam-6062	81	25	c	c	NOUN
bam-6062	81	26	)	)	PUNCT
bam-6062	81	27	and	and	CCONJ
bam-6062	81	28	the	the	DET
bam-6062	81	29	pyrolyzed	pyrolyzed	ADJ
bam-6062	81	30	electrode	electrode	NOUN
bam-6062	81	31	.	.	PUNCT
bam-6062	82	1	the	the	DET
bam-6062	82	2	dominating	dominate	VERB
bam-6062	82	3	atomic	atomic	ADJ
bam-6062	82	4	bonds	bond	NOUN
bam-6062	82	5	in	in	ADP
bam-6062	82	6	parylene	parylene	NOUN
bam-6062	82	7	-	-	PUNCT
bam-6062	82	8	c	c	NOUN
bam-6062	82	9	are	be	AUX
bam-6062	82	10	78.3	78.3	NUM
bam-6062	82	11	%	%	NOUN
bam-6062	82	12	carbon	carbon	NOUN
bam-6062	82	13	-	-	PUNCT
bam-6062	82	14	hydrogen	hydrogen	NOUN
bam-6062	82	15	(	(	PUNCT
bam-6062	82	16	ch	ch	NOUN
bam-6062	82	17	,	,	PUNCT
bam-6062	82	18	c1s=285.0	c1s=285.0	NOUN
bam-6062	82	19	ev	ev	NOUN
bam-6062	82	20	)	)	PUNCT
bam-6062	82	21	and	and	CCONJ
bam-6062	82	22	8.7	8.7	NUM
bam-6062	82	23	%	%	NOUN
bam-6062	82	24	carbon	carbon	NOUN
bam-6062	82	25	-	-	PUNCT
bam-6062	82	26	oxygen	oxygen	NOUN
bam-6062	83	1	(	(	PUNCT
bam-6062	83	2	c	c	NOUN
bam-6062	83	3	-	-	PUNCT
bam-6062	83	4	o	o	NOUN
bam-6062	83	5	,	,	PUNCT
bam-6062	83	6	c1s=286.8	c1s=286.8	NOUN
bam-6062	83	7	ev	ev	VERB
bam-6062	83	8	)	)	PUNCT
bam-6062	83	9	.	.	PUNCT
bam-6062	84	1	there	there	PRON
bam-6062	84	2	are	be	VERB
bam-6062	84	3	no	no	DET
bam-6062	84	4	indicators	indicator	NOUN
bam-6062	84	5	for	for	ADP
bam-6062	84	6	graphitic	graphitic	ADJ
bam-6062	84	7	carbon	carbon	NOUN
bam-6062	84	8	or	or	CCONJ
bam-6062	84	9	for	for	ADP
bam-6062	84	10	the	the	DET
bam-6062	84	11	underlying	underlie	VERB
bam-6062	84	12	platinum	platinum	NOUN
bam-6062	84	13	,	,	PUNCT
bam-6062	84	14	nor	nor	CCONJ
bam-6062	84	15	high	high	ADJ
bam-6062	84	16	concentrations	concentration	NOUN
bam-6062	84	17	of	of	ADP
bam-6062	84	18	salts	salt	NOUN
bam-6062	84	19	.	.	PUNCT
bam-6062	85	1	in	in	ADP
bam-6062	85	2	contrast	contrast	NOUN
bam-6062	85	3	,	,	PUNCT
bam-6062	85	4	the	the	DET
bam-6062	85	5	carbonized	carbonized	ADJ
bam-6062	85	6	area	area	NOUN
bam-6062	85	7	consist	consist	VERB
bam-6062	85	8	mainly	mainly	ADV
bam-6062	85	9	of	of	ADP
bam-6062	85	10	graphitic	graphitic	ADJ
bam-6062	85	11	carbon	carbon	NOUN
bam-6062	85	12	at	at	ADP
bam-6062	85	13	c1s=284.4	c1s=284.4	PROPN
bam-6062	85	14	ev	ev	X
bam-6062	85	15	(	(	PUNCT
bam-6062	85	16	51.5	51.5	NUM
bam-6062	85	17	%	%	NOUN
bam-6062	85	18	)	)	PUNCT
bam-6062	85	19	,	,	PUNCT
bam-6062	85	20	some	some	DET
bam-6062	85	21	c	c	NOUN
bam-6062	85	22	-	-	PUNCT
bam-6062	85	23	h	h	ADJ
bam-6062	85	24	leftovers	leftover	NOUN
bam-6062	85	25	(	(	PUNCT
bam-6062	85	26	13.4	13.4	NUM
bam-6062	85	27	%	%	NOUN
bam-6062	85	28	)	)	PUNCT
bam-6062	85	29	and	and	CCONJ
bam-6062	85	30	a	a	DET
bam-6062	85	31	high	high	ADJ
bam-6062	85	32	amount	amount	NOUN
bam-6062	85	33	of	of	ADP
bam-6062	85	34	sodium	sodium	NOUN
bam-6062	85	35	(	(	PUNCT
bam-6062	85	36	13.4	13.4	NUM
bam-6062	85	37	%	%	NOUN
bam-6062	85	38	)	)	PUNCT
bam-6062	85	39	and	and	CCONJ
bam-6062	85	40	chloride	chloride	NOUN
bam-6062	85	41	(	(	PUNCT
bam-6062	85	42	13.0	13.0	NUM
bam-6062	85	43	%	%	NOUN
bam-6062	85	44	)	)	PUNCT
bam-6062	85	45	.	.	PUNCT
bam-6062	86	1	beside	beside	ADP
bam-6062	86	2	other	other	ADJ
bam-6062	86	3	minor	minor	ADJ
bam-6062	86	4	contaminations	contamination	NOUN
bam-6062	86	5	,	,	PUNCT
bam-6062	86	6	little	little	ADJ
bam-6062	86	7	platinum	platinum	NOUN
bam-6062	86	8	(	(	PUNCT
bam-6062	86	9	<	<	X
bam-6062	86	10	2	2	NUM
bam-6062	86	11	%	%	NOUN
bam-6062	86	12	)	)	PUNCT
bam-6062	86	13	is	be	AUX
bam-6062	86	14	exposed	expose	VERB
bam-6062	86	15	on	on	ADP
bam-6062	86	16	the	the	DET
bam-6062	86	17	electrode	electrode	NOUN
bam-6062	86	18	surface	surface	NOUN
bam-6062	86	19	.	.	PUNCT
bam-6062	87	1	fig	fig	NOUN
bam-6062	87	2	3	3	NUM
bam-6062	87	3	.	.	PUNCT
bam-6062	88	1	picture	picture	NOUN
bam-6062	88	2	of	of	ADP
bam-6062	88	3	the	the	DET
bam-6062	88	4	produced	produce	VERB
bam-6062	88	5	electrode	electrode	NOUN
bam-6062	88	6	(	(	PUNCT
bam-6062	88	7	a	a	NOUN
bam-6062	88	8	)	)	PUNCT
bam-6062	88	9	and	and	CCONJ
bam-6062	88	10	micrograph	micrograph	NOUN
bam-6062	88	11	showing	show	VERB
bam-6062	88	12	the	the	DET
bam-6062	88	13	electrode	electrode	NOUN
bam-6062	88	14	active	active	ADJ
bam-6062	88	15	site	site	NOUN
bam-6062	88	16	(	(	PUNCT
bam-6062	88	17	b	b	NOUN
bam-6062	88	18	)	)	PUNCT
bam-6062	88	19	.	.	PUNCT
bam-6062	89	1	fig	fig	NOUN
bam-6062	89	2	4	4	NUM
bam-6062	89	3	.	.	PUNCT
bam-6062	89	4	detail	detail	NOUN
bam-6062	89	5	xps	xps	PROPN
bam-6062	89	6	carbon	carbon	PROPN
bam-6062	89	7	spectra	spectra	PROPN
bam-6062	89	8	(	(	PUNCT
bam-6062	89	9	c1s	c1s	PROPN
bam-6062	89	10	)	)	PUNCT
bam-6062	89	11	xp	xp	INTJ
bam-6062	89	12	of	of	ADP
bam-6062	89	13	the	the	DET
bam-6062	89	14	electrode	electrode	NOUN
bam-6062	89	15	material	material	NOUN
bam-6062	89	16	(	(	PUNCT
bam-6062	89	17	bottom	bottom	NOUN
bam-6062	89	18	)	)	PUNCT
bam-6062	89	19	and	and	CCONJ
bam-6062	89	20	its	its	PRON
bam-6062	89	21	raw	raw	ADJ
bam-6062	89	22	material	material	NOUN
bam-6062	89	23	(	(	PUNCT
bam-6062	89	24	insulator	insulator	NOUN
bam-6062	89	25	,	,	PUNCT
bam-6062	89	26	top	top	NOUN
bam-6062	89	27	)	)	PUNCT
bam-6062	89	28	.	.	PUNCT
bam-6062	90	1	for	for	ADP
bam-6062	90	2	a	a	DET
bam-6062	90	3	better	well	ADJ
bam-6062	90	4	visualization	visualization	NOUN
bam-6062	90	5	the	the	DET
bam-6062	90	6	spectra	spectra	NOUN
bam-6062	90	7	are	be	AUX
bam-6062	90	8	normalized	normalize	VERB
bam-6062	90	9	to	to	ADP
bam-6062	90	10	maximum	maximum	ADJ
bam-6062	90	11	intensities	intensity	NOUN
bam-6062	90	12	.	.	PUNCT
bam-6062	91	1	the	the	DET
bam-6062	91	2	peak	peak	NOUN
bam-6062	91	3	shape	shape	NOUN
bam-6062	91	4	definition	definition	NOUN
bam-6062	91	5	as	as	ADV
bam-6062	91	6	well	well	ADV
bam-6062	91	7	as	as	ADP
bam-6062	91	8	the	the	DET
bam-6062	91	9	peak	peak	NOUN
bam-6062	91	10	assignments	assignment	NOUN
bam-6062	91	11	are	be	AUX
bam-6062	91	12	according	accord	VERB
bam-6062	91	13	to	to	ADP
bam-6062	91	14	17	17	NUM
bam-6062	91	15	laser	laser	NOUN
bam-6062	91	16	-	-	PUNCT
bam-6062	91	17	induced	induce	VERB
bam-6062	91	18	carbon	carbon	NOUN
bam-6062	91	19	pyrolysis	pyrolysis	NOUN
bam-6062	91	20	of	of	ADP
bam-6062	91	21	electrodes	electrode	NOUN
bam-6062	91	22	for	for	ADP
bam-6062	91	23	neural	neural	ADJ
bam-6062	91	24	interface	interface	NOUN
bam-6062	91	25	systems	system	NOUN
bam-6062	91	26	eur	eur	PROPN
bam-6062	91	27	j	j	PROPN
bam-6062	91	28	transl	transl	PROPN
bam-6062	91	29	myol	myol	NOUN
bam-6062	91	30	26	26	NUM
bam-6062	91	31	(	(	PUNCT
bam-6062	91	32	3	3	NUM
bam-6062	91	33	):	):	PUNCT
bam-6062	91	34	181	181	NUM
bam-6062	91	35	-	-	SYM
bam-6062	91	36	186	186	NUM
bam-6062	91	37	184	184	NUM
bam-6062	91	38	conductance	conductance	NOUN
bam-6062	91	39	test	test	NOUN
bam-6062	91	40	the	the	DET
bam-6062	91	41	pyrolyzed	pyrolyzed	ADJ
bam-6062	91	42	material	material	NOUN
bam-6062	91	43	is	be	AUX
bam-6062	91	44	conductive	conductive	ADJ
bam-6062	91	45	,	,	PUNCT
bam-6062	91	46	presenting	present	VERB
bam-6062	91	47	a	a	DET
bam-6062	91	48	mean	mean	ADJ
bam-6062	91	49	conductance	conductance	NOUN
bam-6062	91	50	at	at	ADP
bam-6062	91	51	position	position	NOUN
bam-6062	91	52	a	a	PRON
bam-6062	91	53	and	and	CCONJ
bam-6062	91	54	b	b	NOUN
bam-6062	91	55	of	of	ADP
bam-6062	91	56	about	about	ADP
bam-6062	91	57	0.4	0.4	NUM
bam-6062	91	58	s	s	NOUN
bam-6062	91	59	and	and	CCONJ
bam-6062	91	60	0.3	0.3	NUM
bam-6062	91	61	s	s	NOUN
bam-6062	91	62	,	,	PUNCT
bam-6062	91	63	respectively	respectively	ADV
bam-6062	91	64	(	(	PUNCT
bam-6062	91	65	fig	fig	NOUN
bam-6062	91	66	.	.	PUNCT
bam-6062	92	1	5	5	NUM
bam-6062	92	2	,	,	PUNCT
bam-6062	92	3	black	black	ADJ
bam-6062	92	4	markers	marker	NOUN
bam-6062	92	5	)	)	PUNCT
bam-6062	92	6	.	.	PUNCT
bam-6062	93	1	furthermore	furthermore	ADV
bam-6062	93	2	,	,	PUNCT
bam-6062	93	3	a	a	DET
bam-6062	93	4	conductive	conductive	ADJ
bam-6062	93	5	transition	transition	NOUN
bam-6062	93	6	between	between	ADP
bam-6062	93	7	the	the	DET
bam-6062	93	8	pyrolyzed	pyrolyzed	ADJ
bam-6062	93	9	layer	layer	NOUN
bam-6062	93	10	and	and	CCONJ
bam-6062	93	11	the	the	DET
bam-6062	93	12	metal	metal	NOUN
bam-6062	93	13	layer	layer	NOUN
bam-6062	93	14	can	can	AUX
bam-6062	93	15	be	be	AUX
bam-6062	93	16	verified	verify	VERB
bam-6062	93	17	from	from	ADP
bam-6062	93	18	the	the	DET
bam-6062	93	19	values	value	NOUN
bam-6062	93	20	measured	measure	VERB
bam-6062	93	21	at	at	ADP
bam-6062	93	22	position	position	NOUN
bam-6062	93	23	c.	c.	NOUN
bam-6062	93	24	the	the	DET
bam-6062	93	25	conductivity	conductivity	NOUN
bam-6062	93	26	for	for	ADP
bam-6062	93	27	pt	pt	NOUN
bam-6062	93	28	:	:	PUNCT
bam-6062	93	29	ir	ir	PROPN
bam-6062	93	30	was	be	AUX
bam-6062	93	31	measured	measure	VERB
bam-6062	93	32	slightly	slightly	ADV
bam-6062	93	33	higher	high	ADJ
bam-6062	93	34	(	(	PUNCT
bam-6062	93	35	approx	approx	PROPN
bam-6062	93	36	.	.	PUNCT
bam-6062	94	1	0.5	0.5	NUM
bam-6062	94	2	s	s	PROPN
bam-6062	94	3	,	,	PUNCT
bam-6062	94	4	fig.5	fig.5	VERB
bam-6062	94	5	white	white	ADJ
bam-6062	94	6	markers	marker	NOUN
bam-6062	94	7	)	)	PUNCT
bam-6062	94	8	.	.	PUNCT
bam-6062	95	1	electrochemical	electrochemical	ADJ
bam-6062	95	2	characterization	characterization	NOUN
bam-6062	95	3	to	to	PART
bam-6062	95	4	study	study	VERB
bam-6062	95	5	the	the	DET
bam-6062	95	6	electrode	electrode	NOUN
bam-6062	95	7	performance	performance	NOUN
bam-6062	95	8	under	under	ADP
bam-6062	95	9	stress	stress	NOUN
bam-6062	95	10	conditions	condition	NOUN
bam-6062	95	11	,	,	PUNCT
bam-6062	95	12	some	some	DET
bam-6062	95	13	electrodes	electrode	NOUN
bam-6062	95	14	were	be	AUX
bam-6062	95	15	cycled	cycle	VERB
bam-6062	95	16	for	for	ADP
bam-6062	95	17	a	a	DET
bam-6062	95	18	longer	long	ADJ
bam-6062	95	19	time	time	NOUN
bam-6062	95	20	frame	frame	NOUN
bam-6062	95	21	.	.	PUNCT
bam-6062	96	1	i.e.	i.e.	X
bam-6062	96	2	90	90	NUM
bam-6062	96	3	cycles	cycle	NOUN
bam-6062	96	4	at	at	ADP
bam-6062	96	5	scan	scan	ADJ
bam-6062	96	6	rate	rate	NOUN
bam-6062	96	7	of	of	ADP
bam-6062	96	8	200	200	NUM
bam-6062	96	9	mv	mv	PROPN
bam-6062	96	10	/	/	SYM
bam-6062	96	11	s.	s.	PROPN
bam-6062	96	12	the	the	DET
bam-6062	96	13	impedance	impedance	NOUN
bam-6062	96	14	magnitude	magnitude	NOUN
bam-6062	96	15	of	of	ADP
bam-6062	96	16	the	the	DET
bam-6062	96	17	pyrolyzed	pyrolyzed	ADJ
bam-6062	96	18	electrode	electrode	NOUN
bam-6062	96	19	was	be	AUX
bam-6062	96	20	found	find	VERB
bam-6062	96	21	to	to	PART
bam-6062	96	22	be	be	AUX
bam-6062	96	23	about	about	ADV
bam-6062	96	24	55	55	NUM
bam-6062	96	25	kω	kω	NOUN
bam-6062	96	26	higher	high	ADJ
bam-6062	96	27	than	than	ADP
bam-6062	96	28	the	the	DET
bam-6062	96	29	measured	measure	VERB
bam-6062	96	30	impedance	impedance	NOUN
bam-6062	96	31	for	for	ADP
bam-6062	96	32	to	to	ADP
bam-6062	96	33	the	the	DET
bam-6062	96	34	reference	reference	NOUN
bam-6062	96	35	(	(	PUNCT
bam-6062	96	36	see	see	VERB
bam-6062	96	37	fig.6	fig.6	PROPN
bam-6062	96	38	)	)	PUNCT
bam-6062	96	39	.	.	PUNCT
bam-6062	97	1	the	the	DET
bam-6062	97	2	impedance	impedance	NOUN
bam-6062	97	3	behavior	behavior	NOUN
bam-6062	97	4	of	of	ADP
bam-6062	97	5	the	the	DET
bam-6062	97	6	pyrolyzed	pyrolyze	VERB
bam-6062	97	7	samples	sample	NOUN
bam-6062	97	8	remained	remain	VERB
bam-6062	97	9	approximately	approximately	ADV
bam-6062	97	10	the	the	DET
bam-6062	97	11	same	same	ADJ
bam-6062	97	12	after	after	ADP
bam-6062	97	13	70	70	NUM
bam-6062	97	14	cycles	cycle	NOUN
bam-6062	97	15	of	of	ADP
bam-6062	97	16	the	the	DET
bam-6062	97	17	cyclic	cyclic	ADJ
bam-6062	97	18	voltammetric	voltammetric	ADJ
bam-6062	97	19	stress	stress	NOUN
bam-6062	97	20	(	(	PUNCT
bam-6062	97	21	fig.7	fig.7	ADJ
bam-6062	97	22	)	)	PUNCT
bam-6062	97	23	but	but	CCONJ
bam-6062	97	24	showed	show	VERB
bam-6062	97	25	a	a	DET
bam-6062	97	26	decrease	decrease	NOUN
bam-6062	97	27	after	after	ADP
bam-6062	97	28	90	90	NUM
bam-6062	97	29	cycles	cycle	NOUN
bam-6062	97	30	.	.	PUNCT
bam-6062	98	1	the	the	DET
bam-6062	98	2	obtained	obtain	VERB
bam-6062	98	3	cyclic	cyclic	NOUN
bam-6062	98	4	voltammograms	voltammogram	NOUN
bam-6062	98	5	revealed	reveal	VERB
bam-6062	98	6	an	an	DET
bam-6062	98	7	increase	increase	NOUN
bam-6062	98	8	in	in	ADP
bam-6062	98	9	the	the	DET
bam-6062	98	10	charge	charge	NOUN
bam-6062	98	11	storage	storage	NOUN
bam-6062	98	12	capacity	capacity	NOUN
bam-6062	98	13	(	(	PUNCT
bam-6062	98	14	csc	csc	PROPN
bam-6062	98	15	)	)	PUNCT
bam-6062	98	16	in	in	ADP
bam-6062	98	17	the	the	DET
bam-6062	98	18	pyrolyzed	pyrolyzed	ADJ
bam-6062	98	19	electrodes	electrode	NOUN
bam-6062	98	20	after	after	ADP
bam-6062	98	21	70	70	NUM
bam-6062	98	22	cycles	cycle	NOUN
bam-6062	98	23	of	of	ADP
bam-6062	98	24	voltammetric	voltammetric	ADJ
bam-6062	98	25	stress	stress	NOUN
bam-6062	98	26	(	(	PUNCT
bam-6062	98	27	fig.7	fig.7	ADJ
bam-6062	98	28	)	)	PUNCT
bam-6062	98	29	.	.	PUNCT
bam-6062	99	1	it	it	PRON
bam-6062	99	2	is	be	AUX
bam-6062	99	3	also	also	ADV
bam-6062	99	4	noticed	notice	VERB
bam-6062	99	5	that	that	SCONJ
bam-6062	99	6	the	the	DET
bam-6062	99	7	voltammogram	voltammogram	NOUN
bam-6062	99	8	shape	shape	NOUN
bam-6062	99	9	of	of	ADP
bam-6062	99	10	the	the	DET
bam-6062	99	11	pyrolyzed	pyrolyze	VERB
bam-6062	99	12	material	material	NOUN
bam-6062	99	13	differs	differ	VERB
bam-6062	99	14	from	from	ADP
bam-6062	99	15	the	the	DET
bam-6062	99	16	reference	reference	NOUN
bam-6062	99	17	including	include	VERB
bam-6062	99	18	a	a	DET
bam-6062	99	19	wider	wide	ADJ
bam-6062	99	20	water	water	NOUN
bam-6062	99	21	window	window	NOUN
bam-6062	99	22	(	(	PUNCT
bam-6062	99	23	fig.8	fig.8	PROPN
bam-6062	99	24	)	)	PUNCT
bam-6062	99	25	.	.	PUNCT
bam-6062	100	1	pulse	pulse	NOUN
bam-6062	100	2	test	test	NOUN
bam-6062	100	3	the	the	DET
bam-6062	100	4	injected	inject	VERB
bam-6062	100	5	charge	charge	NOUN
bam-6062	100	6	density	density	NOUN
bam-6062	100	7	obtained	obtain	VERB
bam-6062	100	8	from	from	ADP
bam-6062	100	9	the	the	DET
bam-6062	100	10	used	use	VERB
bam-6062	100	11	waveform	waveform	NOUN
bam-6062	100	12	corresponds	correspond	NOUN
bam-6062	100	13	to	to	ADP
bam-6062	100	14	10.3	10.3	NUM
bam-6062	100	15	μc	μc	NOUN
bam-6062	100	16	/	/	SYM
bam-6062	100	17	cm2	cm2	PROPN
bam-6062	100	18	,	,	PUNCT
bam-6062	100	19	calculated	calculate	VERB
bam-6062	100	20	using	use	VERB
bam-6062	100	21	eq.2	eq.2	NOUN
bam-6062	100	22	.	.	PUNCT
bam-6062	101	1	𝑄	𝑄	PROPN
bam-6062	101	2	=	=	SYM
bam-6062	101	3	𝐼.𝑡	𝐼.𝑡	PROPN
bam-6062	101	4	𝐴	𝐴	PROPN
bam-6062	101	5	(	(	PUNCT
bam-6062	101	6	2	2	NUM
bam-6062	101	7	)	)	PUNCT
bam-6062	101	8	where	where	SCONJ
bam-6062	101	9	q	q	NOUN
bam-6062	101	10	(	(	PUNCT
bam-6062	101	11	µc	µc	PROPN
bam-6062	101	12	/	/	SYM
bam-6062	101	13	cm2	cm2	NOUN
bam-6062	101	14	)	)	PUNCT
bam-6062	101	15	is	be	AUX
bam-6062	101	16	the	the	DET
bam-6062	101	17	charge	charge	NOUN
bam-6062	101	18	density	density	NOUN
bam-6062	101	19	,	,	PUNCT
bam-6062	101	20	i	i	PRON
bam-6062	101	21	is	be	AUX
bam-6062	101	22	the	the	DET
bam-6062	101	23	applied	applied	ADJ
bam-6062	101	24	current	current	ADJ
bam-6062	101	25	(	(	PUNCT
bam-6062	101	26	a	a	NOUN
bam-6062	101	27	)	)	PUNCT
bam-6062	101	28	,	,	PUNCT
bam-6062	101	29	t	t	PROPN
bam-6062	101	30	is	be	AUX
bam-6062	101	31	the	the	DET
bam-6062	101	32	pulse	pulse	NOUN
bam-6062	101	33	width	width	NOUN
bam-6062	101	34	(	(	PUNCT
bam-6062	101	35	µs	µs	NOUN
bam-6062	101	36	)	)	PUNCT
bam-6062	101	37	and	and	CCONJ
bam-6062	101	38	a	a	DET
bam-6062	101	39	(	(	PUNCT
bam-6062	101	40	cm2	cm2	NOUN
bam-6062	101	41	)	)	PUNCT
bam-6062	101	42	is	be	AUX
bam-6062	101	43	the	the	DET
bam-6062	101	44	geometric	geometric	ADJ
bam-6062	101	45	surface	surface	NOUN
bam-6062	101	46	area	area	NOUN
bam-6062	101	47	of	of	ADP
bam-6062	101	48	the	the	DET
bam-6062	101	49	electrode	electrode	NOUN
bam-6062	101	50	.	.	PUNCT
bam-6062	102	1	the	the	DET
bam-6062	102	2	measured	measure	VERB
bam-6062	102	3	potential	potential	ADJ
bam-6062	102	4	drop	drop	NOUN
bam-6062	102	5	across	across	ADP
bam-6062	102	6	the	the	DET
bam-6062	102	7	access	access	NOUN
bam-6062	102	8	resistance	resistance	NOUN
bam-6062	102	9	was	be	AUX
bam-6062	102	10	found	find	VERB
bam-6062	102	11	to	to	PART
bam-6062	102	12	be	be	AUX
bam-6062	102	13	roughly	roughly	ADV
bam-6062	102	14	the	the	DET
bam-6062	102	15	same	same	ADJ
bam-6062	102	16	for	for	ADP
bam-6062	102	17	both	both	CCONJ
bam-6062	102	18	the	the	DET
bam-6062	102	19	pyrolyzed	pyrolyzed	ADJ
bam-6062	102	20	electrode	electrode	NOUN
bam-6062	102	21	and	and	CCONJ
bam-6062	102	22	the	the	DET
bam-6062	102	23	pt	pt	PROPN
bam-6062	102	24	:	:	PUNCT
bam-6062	102	25	ir	ir	PROPN
bam-6062	102	26	reference	reference	NOUN
bam-6062	102	27	,	,	PUNCT
bam-6062	102	28	corresponding	correspond	VERB
bam-6062	102	29	approximately	approximately	ADV
bam-6062	102	30	100	100	NUM
bam-6062	102	31	mv	mv	PROPN
bam-6062	102	32	(	(	PUNCT
bam-6062	102	33	fig.9	fig.9	PROPN
bam-6062	102	34	,	,	PUNCT
bam-6062	102	35	initial	initial	ADJ
bam-6062	102	36	step	step	NOUN
bam-6062	102	37	)	)	PUNCT
bam-6062	102	38	.	.	PUNCT
bam-6062	103	1	the	the	DET
bam-6062	103	2	pulse	pulse	NOUN
bam-6062	103	3	test	test	NOUN
bam-6062	103	4	,	,	PUNCT
bam-6062	103	5	as	as	SCONJ
bam-6062	103	6	described	describe	VERB
bam-6062	103	7	in	in	ADP
bam-6062	103	8	method	method	NOUN
bam-6062	103	9	section	section	NOUN
bam-6062	103	10	resulted	result	VERB
bam-6062	103	11	in	in	ADP
bam-6062	103	12	emc	emc	PROPN
bam-6062	103	13	of	of	ADP
bam-6062	103	14	,	,	PUNCT
bam-6062	103	15	approximately	approximately	ADV
bam-6062	103	16	1	1	NUM
bam-6062	103	17	v	v	NOUN
bam-6062	103	18	in	in	ADP
bam-6062	103	19	case	case	NOUN
bam-6062	103	20	of	of	ADP
bam-6062	103	21	pyrolyzed	pyrolyzed	ADJ
bam-6062	103	22	electrodes	electrode	NOUN
bam-6062	103	23	which	which	PRON
bam-6062	103	24	was	be	AUX
bam-6062	103	25	about	about	ADV
bam-6062	103	26	700	700	NUM
bam-6062	103	27	mv	mv	NOUN
bam-6062	103	28	higher	high	ADJ
bam-6062	103	29	than	than	ADP
bam-6062	103	30	the	the	DET
bam-6062	103	31	measured	measure	VERB
bam-6062	103	32	value	value	NOUN
bam-6062	103	33	for	for	ADP
bam-6062	103	34	the	the	DET
bam-6062	103	35	reference	reference	NOUN
bam-6062	103	36	pt	pt	PROPN
bam-6062	103	37	-	-	PROPN
bam-6062	103	38	ir	ir	PROPN
bam-6062	103	39	(	(	PUNCT
bam-6062	103	40	fig.9	fig.9	PROPN
bam-6062	103	41	)	)	PUNCT
bam-6062	103	42	.	.	PUNCT
bam-6062	104	1	however	however	ADV
bam-6062	104	2	,	,	PUNCT
bam-6062	104	3	after	after	ADP
bam-6062	104	4	stressing	stress	VERB
bam-6062	104	5	the	the	DET
bam-6062	104	6	electrode	electrode	NOUN
bam-6062	104	7	by	by	ADP
bam-6062	104	8	cyclic	cyclic	ADJ
bam-6062	104	9	voltammetry	voltammetry	NOUN
bam-6062	104	10	the	the	DET
bam-6062	104	11	emc	emc	PROPN
bam-6062	104	12	experienced	experience	VERB
bam-6062	104	13	a	a	DET
bam-6062	104	14	drop	drop	NOUN
bam-6062	104	15	of	of	ADP
bam-6062	104	16	,	,	PUNCT
bam-6062	104	17	approximately	approximately	ADV
bam-6062	104	18	,	,	PUNCT
bam-6062	104	19	300	300	NUM
bam-6062	104	20	mv	mv	NOUN
bam-6062	104	21	.	.	PUNCT
bam-6062	105	1	the	the	DET
bam-6062	105	2	voltage	voltage	NOUN
bam-6062	105	3	excursion	excursion	NOUN
bam-6062	105	4	observed	observe	VERB
bam-6062	105	5	for	for	ADP
bam-6062	105	6	the	the	DET
bam-6062	105	7	pyrolyzed	pyrolyze	VERB
bam-6062	105	8	material	material	NOUN
bam-6062	105	9	remained	remain	VERB
bam-6062	105	10	within	within	ADP
bam-6062	105	11	the	the	DET
bam-6062	105	12	water	water	NOUN
bam-6062	105	13	window	window	NOUN
bam-6062	105	14	limit	limit	NOUN
bam-6062	105	15	throughout	throughout	ADP
bam-6062	105	16	the	the	DET
bam-6062	105	17	measurement	measurement	NOUN
bam-6062	105	18	even	even	ADV
bam-6062	105	19	in	in	ADP
bam-6062	105	20	case	case	NOUN
bam-6062	105	21	of	of	ADP
bam-6062	105	22	ramping	ramp	VERB
bam-6062	105	23	up	up	ADP
bam-6062	105	24	the	the	DET
bam-6062	105	25	injected	inject	VERB
bam-6062	105	26	current	current	NOUN
bam-6062	105	27	up	up	ADP
bam-6062	105	28	to	to	ADP
bam-6062	105	29	1000	1000	NUM
bam-6062	105	30	µa	µa	NOUN
bam-6062	105	31	.	.	PROPN
bam-6062	105	32	fig	fig	PROPN
bam-6062	105	33	5	5	NUM
bam-6062	105	34	.	.	PUNCT
bam-6062	105	35	conductance	conductance	NOUN
bam-6062	105	36	measurements	measurement	NOUN
bam-6062	105	37	of	of	ADP
bam-6062	105	38	the	the	DET
bam-6062	105	39	pyrolyzed	pyrolyzed	ADJ
bam-6062	105	40	material	material	NOUN
bam-6062	105	41	and	and	CCONJ
bam-6062	105	42	of	of	ADP
bam-6062	105	43	a	a	DET
bam-6062	105	44	pt	pt	PROPN
bam-6062	105	45	:	:	PUNCT
bam-6062	105	46	ir	ir	PROPN
bam-6062	105	47	reference	reference	NOUN
bam-6062	105	48	at	at	ADP
bam-6062	105	49	the	the	DET
bam-6062	105	50	different	different	ADJ
bam-6062	105	51	position	position	NOUN
bam-6062	105	52	shown	show	VERB
bam-6062	105	53	in	in	ADP
bam-6062	105	54	figure	figure	NOUN
bam-6062	105	55	2	2	NUM
bam-6062	105	56	.	.	PUNCT
bam-6062	105	57	data	datum	NOUN
bam-6062	105	58	show	show	NOUN
bam-6062	105	59	mean	mean	VERB
bam-6062	105	60	,	,	PUNCT
bam-6062	105	61	minimum	minimum	ADJ
bam-6062	105	62	and	and	CCONJ
bam-6062	105	63	maximum	maximum	ADJ
bam-6062	105	64	values	value	NOUN
bam-6062	105	65	.	.	PUNCT
bam-6062	106	1	fig	fig	NOUN
bam-6062	106	2	6	6	NUM
bam-6062	106	3	.	.	PUNCT
bam-6062	107	1	eis	eis	PROPN
bam-6062	107	2	measurements	measurement	NOUN
bam-6062	107	3	of	of	ADP
bam-6062	107	4	the	the	DET
bam-6062	107	5	pt	pt	PROPN
bam-6062	107	6	:	:	PUNCT
bam-6062	107	7	ir	ir	ADJ
bam-6062	107	8	electrode	electrode	NOUN
bam-6062	107	9	and	and	CCONJ
bam-6062	107	10	of	of	ADP
bam-6062	107	11	the	the	DET
bam-6062	107	12	pyrolyzed	pyrolyzed	ADJ
bam-6062	107	13	electrode	electrode	NOUN
bam-6062	107	14	on	on	ADP
bam-6062	107	15	beginning	begin	VERB
bam-6062	107	16	(	(	PUNCT
bam-6062	107	17	after	after	ADP
bam-6062	107	18	6	6	NUM
bam-6062	107	19	cv	cv	PROPN
bam-6062	107	20	cycles	cycle	NOUN
bam-6062	107	21	)	)	PUNCT
bam-6062	107	22	,	,	PUNCT
bam-6062	107	23	after	after	ADP
bam-6062	107	24	70	70	NUM
bam-6062	107	25	cv	cv	PROPN
bam-6062	107	26	cycles	cycle	NOUN
bam-6062	107	27	,	,	PUNCT
bam-6062	107	28	pulse	pulse	NOUN
bam-6062	107	29	test	test	NOUN
bam-6062	107	30	and	and	CCONJ
bam-6062	107	31	90	90	NUM
bam-6062	107	32	cv	cv	PROPN
bam-6062	107	33	cycles	cycle	NOUN
bam-6062	107	34	.	.	PUNCT
bam-6062	108	1	fig	fig	NOUN
bam-6062	108	2	7	7	NUM
bam-6062	108	3	.	.	PUNCT
bam-6062	108	4	voltammogram	voltammogram	NOUN
bam-6062	108	5	of	of	ADP
bam-6062	108	6	pyrolyzed	pyrolyzed	ADJ
bam-6062	108	7	electrode	electrode	NOUN
bam-6062	108	8	at	at	ADP
bam-6062	108	9	beginning	begin	VERB
bam-6062	108	10	(	(	PUNCT
bam-6062	108	11	after	after	ADP
bam-6062	108	12	6	6	NUM
bam-6062	108	13	cv	cv	PROPN
bam-6062	108	14	cycles	cycle	NOUN
bam-6062	108	15	)	)	PUNCT
bam-6062	108	16	,	,	PUNCT
bam-6062	108	17	after	after	ADP
bam-6062	108	18	70	70	NUM
bam-6062	108	19	cv	cv	PROPN
bam-6062	108	20	cycles	cycle	NOUN
bam-6062	108	21	and	and	CCONJ
bam-6062	108	22	after	after	ADP
bam-6062	108	23	pulse	pulse	NOUN
bam-6062	108	24	test	test	NOUN
bam-6062	108	25	.	.	PUNCT
bam-6062	109	1	fig	fig	NOUN
bam-6062	109	2	8	8	NUM
bam-6062	109	3	.	.	PUNCT
bam-6062	110	1	voltammogram	voltammogram	NOUN
bam-6062	110	2	of	of	ADP
bam-6062	110	3	the	the	DET
bam-6062	110	4	pyrolyzed	pyrolyzed	ADJ
bam-6062	110	5	electrode	electrode	NOUN
bam-6062	110	6	after	after	ADP
bam-6062	110	7	pulse	pulse	NOUN
bam-6062	110	8	test	test	NOUN
bam-6062	110	9	and	and	CCONJ
bam-6062	110	10	after	after	ADP
bam-6062	110	11	90	90	NUM
bam-6062	110	12	cv	cv	PROPN
bam-6062	110	13	cycles	cycle	NOUN
bam-6062	110	14	and	and	CCONJ
bam-6062	110	15	of	of	ADP
bam-6062	110	16	the	the	DET
bam-6062	110	17	pt	pt	PROPN
bam-6062	110	18	:	:	PUNCT
bam-6062	110	19	ir	ir	PROPN
bam-6062	110	20	reference	reference	NOUN
bam-6062	110	21	.	.	PUNCT
bam-6062	111	1	laser	laser	NOUN
bam-6062	111	2	-	-	PUNCT
bam-6062	111	3	induced	induce	VERB
bam-6062	111	4	carbon	carbon	NOUN
bam-6062	111	5	pyrolysis	pyrolysis	NOUN
bam-6062	111	6	of	of	ADP
bam-6062	111	7	electrodes	electrode	NOUN
bam-6062	111	8	for	for	ADP
bam-6062	111	9	neural	neural	ADJ
bam-6062	111	10	interface	interface	NOUN
bam-6062	111	11	systems	system	NOUN
bam-6062	111	12	eur	eur	PROPN
bam-6062	111	13	j	j	PROPN
bam-6062	111	14	transl	transl	PROPN
bam-6062	111	15	myol	myol	NOUN
bam-6062	111	16	26	26	NUM
bam-6062	111	17	(	(	PUNCT
bam-6062	111	18	3	3	NUM
bam-6062	111	19	):	):	PUNCT
bam-6062	111	20	181	181	NUM
bam-6062	111	21	-	-	SYM
bam-6062	111	22	186	186	NUM
bam-6062	111	23	185	185	NUM
bam-6062	111	24	discussion	discussion	NOUN
bam-6062	111	25	the	the	DET
bam-6062	111	26	image	image	NOUN
bam-6062	111	27	taken	take	VERB
bam-6062	111	28	of	of	ADP
bam-6062	111	29	the	the	DET
bam-6062	111	30	pyrolyzed	pyrolyzed	ADJ
bam-6062	111	31	active	active	ADJ
bam-6062	111	32	site	site	NOUN
bam-6062	111	33	revealed	reveal	VERB
bam-6062	111	34	a	a	DET
bam-6062	111	35	rough	rough	ADJ
bam-6062	111	36	surface	surface	NOUN
bam-6062	111	37	which	which	PRON
bam-6062	111	38	could	could	AUX
bam-6062	111	39	suggest	suggest	VERB
bam-6062	111	40	a	a	DET
bam-6062	111	41	high	high	ADJ
bam-6062	111	42	charge	charge	NOUN
bam-6062	111	43	injection	injection	NOUN
bam-6062	111	44	storage	storage	NOUN
bam-6062	111	45	capacitance	capacitance	NOUN
bam-6062	111	46	.	.	PUNCT
bam-6062	112	1	however	however	ADV
bam-6062	112	2	,	,	PUNCT
bam-6062	112	3	further	further	ADJ
bam-6062	112	4	investigations	investigation	NOUN
bam-6062	112	5	are	be	AUX
bam-6062	112	6	required	require	VERB
bam-6062	112	7	in	in	ADP
bam-6062	112	8	order	order	NOUN
bam-6062	112	9	to	to	PART
bam-6062	112	10	draw	draw	VERB
bam-6062	112	11	a	a	DET
bam-6062	112	12	concrete	concrete	ADJ
bam-6062	112	13	conclusion	conclusion	NOUN
bam-6062	112	14	on	on	ADP
bam-6062	112	15	that	that	PRON
bam-6062	112	16	.	.	PUNCT
bam-6062	113	1	furthermore	furthermore	ADV
bam-6062	113	2	,	,	PUNCT
bam-6062	113	3	a	a	DET
bam-6062	113	4	smooth	smooth	ADJ
bam-6062	113	5	transition	transition	NOUN
bam-6062	113	6	between	between	ADP
bam-6062	113	7	insulation	insulation	NOUN
bam-6062	113	8	and	and	CCONJ
bam-6062	113	9	the	the	DET
bam-6062	113	10	active	active	ADJ
bam-6062	113	11	site	site	NOUN
bam-6062	113	12	was	be	AUX
bam-6062	113	13	observed	observe	VERB
bam-6062	113	14	which	which	PRON
bam-6062	113	15	can	can	AUX
bam-6062	113	16	be	be	AUX
bam-6062	113	17	advantageous	advantageous	ADJ
bam-6062	113	18	with	with	ADP
bam-6062	113	19	respect	respect	NOUN
bam-6062	113	20	to	to	ADP
bam-6062	113	21	the	the	DET
bam-6062	113	22	concerns	concern	NOUN
bam-6062	113	23	on	on	ADP
bam-6062	113	24	the	the	DET
bam-6062	113	25	tissue	tissue	NOUN
bam-6062	113	26	interactions	interaction	NOUN
bam-6062	113	27	.	.	PUNCT
bam-6062	114	1	xps	xps	PROPN
bam-6062	114	2	data	data	PROPN
bam-6062	114	3	showed	show	VERB
bam-6062	114	4	a	a	DET
bam-6062	114	5	clear	clear	ADJ
bam-6062	114	6	transformation	transformation	NOUN
bam-6062	114	7	of	of	ADP
bam-6062	114	8	the	the	DET
bam-6062	114	9	chemical	chemical	NOUN
bam-6062	114	10	structure	structure	NOUN
bam-6062	114	11	of	of	ADP
bam-6062	114	12	parylene	parylene	NOUN
bam-6062	114	13	-	-	PUNCT
bam-6062	114	14	c	c	NOUN
bam-6062	114	15	to	to	ADP
bam-6062	114	16	a	a	DET
bam-6062	114	17	graphitic	graphitic	ADJ
bam-6062	114	18	carbon	carbon	NOUN
bam-6062	114	19	layer	layer	NOUN
bam-6062	114	20	.	.	PUNCT
bam-6062	115	1	since	since	SCONJ
bam-6062	115	2	sodium	sodium	NOUN
bam-6062	115	3	-	-	PUNCT
bam-6062	115	4	chloride	chloride	NOUN
bam-6062	115	5	is	be	AUX
bam-6062	115	6	not	not	PART
bam-6062	115	7	present	present	ADJ
bam-6062	115	8	in	in	ADP
bam-6062	115	9	the	the	DET
bam-6062	115	10	fabrication	fabrication	NOUN
bam-6062	115	11	process	process	NOUN
bam-6062	115	12	,	,	PUNCT
bam-6062	115	13	it	it	PRON
bam-6062	115	14	is	be	AUX
bam-6062	115	15	most	most	ADV
bam-6062	115	16	likely	likely	ADJ
bam-6062	115	17	a	a	DET
bam-6062	115	18	left	left	NOUN
bam-6062	115	19	over	over	ADP
bam-6062	115	20	contamination	contamination	NOUN
bam-6062	115	21	from	from	ADP
bam-6062	115	22	the	the	DET
bam-6062	115	23	electrochemical	electrochemical	ADJ
bam-6062	115	24	tests	test	NOUN
bam-6062	115	25	performed	perform	VERB
bam-6062	115	26	prior	prior	ADV
bam-6062	115	27	to	to	ADP
bam-6062	115	28	the	the	DET
bam-6062	115	29	xps	xps	PROPN
bam-6062	115	30	measurements	measurement	NOUN
bam-6062	115	31	.	.	PUNCT
bam-6062	116	1	the	the	DET
bam-6062	116	2	obtained	obtain	VERB
bam-6062	116	3	cyclic	cyclic	NOUN
bam-6062	116	4	voltammograms	voltammogram	NOUN
bam-6062	116	5	reveal	reveal	VERB
bam-6062	116	6	change	change	NOUN
bam-6062	116	7	in	in	ADP
bam-6062	116	8	the	the	DET
bam-6062	116	9	electrochemical	electrochemical	ADJ
bam-6062	116	10	performance	performance	NOUN
bam-6062	116	11	of	of	ADP
bam-6062	116	12	the	the	DET
bam-6062	116	13	pyrolyzed	pyrolyzed	ADJ
bam-6062	116	14	electrode	electrode	NOUN
bam-6062	116	15	as	as	SCONJ
bam-6062	116	16	compared	compare	VERB
bam-6062	116	17	to	to	ADP
bam-6062	116	18	the	the	DET
bam-6062	116	19	pt	pt	PROPN
bam-6062	116	20	-	-	PUNCT
bam-6062	116	21	ir	ir	NOUN
bam-6062	116	22	reference	reference	NOUN
bam-6062	116	23	.	.	PUNCT
bam-6062	117	1	the	the	DET
bam-6062	117	2	observed	observed	ADJ
bam-6062	117	3	characteristics	characteristic	NOUN
bam-6062	117	4	can	can	AUX
bam-6062	117	5	suggest	suggest	VERB
bam-6062	117	6	the	the	DET
bam-6062	117	7	possible	possible	ADJ
bam-6062	117	8	presence	presence	NOUN
bam-6062	117	9	of	of	ADP
bam-6062	117	10	carbon	carbon	NOUN
bam-6062	117	11	substances	substance	NOUN
bam-6062	117	12	,	,	PUNCT
bam-6062	117	13	which	which	PRON
bam-6062	117	14	is	be	AUX
bam-6062	117	15	in	in	ADP
bam-6062	117	16	agreement	agreement	NOUN
bam-6062	117	17	with	with	ADP
bam-6062	117	18	the	the	DET
bam-6062	117	19	xps	xps	PROPN
bam-6062	117	20	results	result	NOUN
bam-6062	117	21	.	.	PUNCT
bam-6062	118	1	observed	observe	VERB
bam-6062	118	2	in	in	ADP
bam-6062	118	3	the	the	DET
bam-6062	118	4	electrode	electrode	NOUN
bam-6062	118	5	cycled	cycled	AUX
bam-6062	118	6	for	for	ADP
bam-6062	118	7	70	70	NUM
bam-6062	118	8	cycles	cycle	NOUN
bam-6062	118	9	,	,	PUNCT
bam-6062	118	10	a	a	DET
bam-6062	118	11	plausible	plausible	ADJ
bam-6062	118	12	surface	surface	NOUN
bam-6062	118	13	activation	activation	NOUN
bam-6062	118	14	can	can	AUX
bam-6062	118	15	be	be	AUX
bam-6062	118	16	suggested	suggest	VERB
bam-6062	118	17	in	in	ADP
bam-6062	118	18	case	case	NOUN
bam-6062	118	19	of	of	ADP
bam-6062	118	20	the	the	DET
bam-6062	118	21	pyrolyzed	pyrolyze	VERB
bam-6062	118	22	electrodes	electrode	NOUN
bam-6062	118	23	.	.	PUNCT
bam-6062	119	1	this	this	PRON
bam-6062	119	2	can	can	AUX
bam-6062	119	3	be	be	AUX
bam-6062	119	4	attributed	attribute	VERB
bam-6062	119	5	to	to	ADP
bam-6062	119	6	a	a	DET
bam-6062	119	7	surface	surface	NOUN
bam-6062	119	8	activation	activation	NOUN
bam-6062	119	9	under	under	ADP
bam-6062	119	10	the	the	DET
bam-6062	119	11	stress	stress	NOUN
bam-6062	119	12	condition	condition	NOUN
bam-6062	119	13	resulted	result	VERB
bam-6062	119	14	from	from	ADP
bam-6062	119	15	the	the	DET
bam-6062	119	16	slow	slow	ADJ
bam-6062	119	17	kinetic	kinetic	NOUN
bam-6062	119	18	transform	transform	NOUN
bam-6062	119	19	.	.	PUNCT
bam-6062	120	1	the	the	DET
bam-6062	120	2	observed	observed	ADJ
bam-6062	120	3	behavior	behavior	NOUN
bam-6062	120	4	can	can	AUX
bam-6062	120	5	also	also	ADV
bam-6062	120	6	explain	explain	VERB
bam-6062	120	7	the	the	DET
bam-6062	120	8	smaller	small	ADJ
bam-6062	120	9	voltage	voltage	NOUN
bam-6062	120	10	excursion	excursion	NOUN
bam-6062	120	11	of	of	ADP
bam-6062	120	12	the	the	DET
bam-6062	120	13	pyrolyzed	pyrolyze	VERB
bam-6062	120	14	samples	sample	NOUN
bam-6062	120	15	after	after	ADP
bam-6062	120	16	70	70	NUM
bam-6062	120	17	cv	cv	NOUN
bam-6062	120	18	-	-	PUNCT
bam-6062	120	19	cycles	cycle	NOUN
bam-6062	120	20	as	as	SCONJ
bam-6062	120	21	compared	compare	VERB
bam-6062	120	22	to	to	ADP
bam-6062	120	23	the	the	DET
bam-6062	120	24	freshly	freshly	ADV
bam-6062	120	25	pyrolyzed	pyrolyze	VERB
bam-6062	120	26	electrodes	electrode	NOUN
bam-6062	120	27	.	.	PUNCT
bam-6062	121	1	the	the	DET
bam-6062	121	2	surface	surface	NOUN
bam-6062	121	3	activation	activation	NOUN
bam-6062	121	4	can	can	AUX
bam-6062	121	5	be	be	AUX
bam-6062	121	6	due	due	ADJ
bam-6062	121	7	to	to	ADP
bam-6062	121	8	the	the	DET
bam-6062	121	9	presence	presence	NOUN
bam-6062	121	10	of	of	ADP
bam-6062	121	11	residual	residual	ADJ
bam-6062	121	12	parylene	parylene	NOUN
bam-6062	121	13	-	-	PUNCT
bam-6062	121	14	c	c	NOUN
bam-6062	121	15	on	on	ADP
bam-6062	121	16	the	the	DET
bam-6062	121	17	surface	surface	NOUN
bam-6062	121	18	,	,	PUNCT
bam-6062	121	19	preventing	prevent	VERB
bam-6062	121	20	a	a	DET
bam-6062	121	21	full	full	ADJ
bam-6062	121	22	access	access	NOUN
bam-6062	121	23	of	of	ADP
bam-6062	121	24	the	the	DET
bam-6062	121	25	pyrolyzed	pyrolyzed	ADJ
bam-6062	121	26	active	active	ADJ
bam-6062	121	27	site	site	NOUN
bam-6062	121	28	.	.	PUNCT
bam-6062	122	1	repetitive	repetitive	ADJ
bam-6062	122	2	cvs	cvs	NOUN
bam-6062	122	3	can	can	AUX
bam-6062	122	4	potentially	potentially	ADV
bam-6062	122	5	sweep	sweep	VERB
bam-6062	122	6	the	the	DET
bam-6062	122	7	residues	residue	NOUN
bam-6062	122	8	off	off	ADP
bam-6062	122	9	the	the	DET
bam-6062	122	10	surface	surface	NOUN
bam-6062	122	11	.	.	PUNCT
bam-6062	123	1	this	this	PRON
bam-6062	123	2	in	in	ADP
bam-6062	123	3	turn	turn	NOUN
bam-6062	123	4	would	would	AUX
bam-6062	123	5	also	also	ADV
bam-6062	123	6	result	result	VERB
bam-6062	123	7	in	in	ADP
bam-6062	123	8	a	a	DET
bam-6062	123	9	more	more	ADV
bam-6062	123	10	pronounced	pronounced	ADJ
bam-6062	123	11	carbon	carbon	NOUN
bam-6062	123	12	-	-	PUNCT
bam-6062	123	13	featured	feature	VERB
bam-6062	123	14	surface	surface	NOUN
bam-6062	123	15	and	and	CCONJ
bam-6062	123	16	hence	hence	ADV
bam-6062	123	17	,	,	PUNCT
bam-6062	123	18	supports	support	VERB
bam-6062	123	19	the	the	DET
bam-6062	123	20	proposed	propose	VERB
bam-6062	123	21	concept	concept	NOUN
bam-6062	123	22	.	.	PUNCT
bam-6062	124	1	however	however	ADV
bam-6062	124	2	,	,	PUNCT
bam-6062	124	3	further	further	ADJ
bam-6062	124	4	studies	study	NOUN
bam-6062	124	5	to	to	PART
bam-6062	124	6	investigate	investigate	VERB
bam-6062	124	7	the	the	DET
bam-6062	124	8	performance	performance	NOUN
bam-6062	124	9	of	of	ADP
bam-6062	124	10	the	the	DET
bam-6062	124	11	electrode	electrode	NOUN
bam-6062	124	12	under	under	ADP
bam-6062	124	13	higher	high	ADJ
bam-6062	124	14	charge	charge	NOUN
bam-6062	124	15	injection	injection	NOUN
bam-6062	124	16	levels	level	NOUN
bam-6062	124	17	should	should	AUX
bam-6062	124	18	be	be	AUX
bam-6062	124	19	conducted	conduct	VERB
bam-6062	124	20	.	.	PUNCT
bam-6062	125	1	despite	despite	SCONJ
bam-6062	125	2	of	of	ADP
bam-6062	125	3	a	a	DET
bam-6062	125	4	lower	low	ADJ
bam-6062	125	5	performance	performance	NOUN
bam-6062	125	6	of	of	ADP
bam-6062	125	7	the	the	DET
bam-6062	125	8	produced	produce	VERB
bam-6062	125	9	electrodes	electrode	NOUN
bam-6062	125	10	as	as	SCONJ
bam-6062	125	11	compared	compare	VERB
bam-6062	125	12	to	to	ADP
bam-6062	125	13	the	the	DET
bam-6062	125	14	given	give	VERB
bam-6062	125	15	characteristics	characteristic	NOUN
bam-6062	125	16	for	for	ADP
bam-6062	125	17	the	the	DET
bam-6062	125	18	pt	pt	PROPN
bam-6062	125	19	-	-	PUNCT
bam-6062	125	20	ir	ir	NOUN
bam-6062	125	21	reference	reference	NOUN
bam-6062	125	22	,	,	PUNCT
bam-6062	125	23	the	the	DET
bam-6062	125	24	obtained	obtain	VERB
bam-6062	125	25	results	result	NOUN
bam-6062	125	26	can	can	AUX
bam-6062	125	27	suggest	suggest	VERB
bam-6062	125	28	that	that	SCONJ
bam-6062	125	29	an	an	DET
bam-6062	125	30	improvement	improvement	NOUN
bam-6062	125	31	in	in	ADP
bam-6062	125	32	the	the	DET
bam-6062	125	33	electrochemical	electrochemical	ADJ
bam-6062	125	34	performance	performance	NOUN
bam-6062	125	35	of	of	ADP
bam-6062	125	36	the	the	DET
bam-6062	125	37	novel	novel	ADJ
bam-6062	125	38	carbon	carbon	NOUN
bam-6062	125	39	-	-	PUNCT
bam-6062	125	40	based	base	VERB
bam-6062	125	41	electrode	electrode	NOUN
bam-6062	125	42	is	be	AUX
bam-6062	125	43	possible	possible	ADJ
bam-6062	125	44	.	.	PUNCT
bam-6062	126	1	furthermore	furthermore	ADV
bam-6062	126	2	,	,	PUNCT
bam-6062	126	3	the	the	DET
bam-6062	126	4	feasibility	feasibility	NOUN
bam-6062	126	5	of	of	ADP
bam-6062	126	6	the	the	DET
bam-6062	126	7	proposed	propose	VERB
bam-6062	126	8	methodology	methodology	NOUN
bam-6062	126	9	regarding	regard	VERB
bam-6062	126	10	simplicity	simplicity	NOUN
bam-6062	126	11	,	,	PUNCT
bam-6062	126	12	time	time	NOUN
bam-6062	126	13	and	and	CCONJ
bam-6062	126	14	cost	cost	NOUN
bam-6062	126	15	efficiency	efficiency	NOUN
bam-6062	126	16	was	be	AUX
bam-6062	126	17	successfully	successfully	ADV
bam-6062	126	18	addressed	address	VERB
bam-6062	126	19	.	.	PUNCT
bam-6062	127	1	this	this	DET
bam-6062	127	2	proposed	propose	VERB
bam-6062	127	3	methodology	methodology	NOUN
bam-6062	127	4	addressing	address	VERB
bam-6062	127	5	the	the	DET
bam-6062	127	6	carbon	carbon	NOUN
bam-6062	127	7	-	-	PUNCT
bam-6062	127	8	based	base	VERB
bam-6062	127	9	electrode	electrode	NOUN
bam-6062	127	10	can	can	AUX
bam-6062	127	11	potentially	potentially	ADV
bam-6062	127	12	provide	provide	VERB
bam-6062	127	13	the	the	DET
bam-6062	127	14	field	field	NOUN
bam-6062	127	15	of	of	ADP
bam-6062	127	16	research	research	NOUN
bam-6062	127	17	with	with	ADP
bam-6062	127	18	a	a	DET
bam-6062	127	19	versatility	versatility	NOUN
bam-6062	127	20	of	of	ADP
bam-6062	127	21	applications	application	NOUN
bam-6062	127	22	,	,	PUNCT
bam-6062	127	23	e.g.	e.g.	ADV
bam-6062	127	24	neurotransmitter	neurotransmitter	NOUN
bam-6062	127	25	detection	detection	NOUN
bam-6062	127	26	,	,	PUNCT
bam-6062	127	27	and	and	CCONJ
bam-6062	127	28	hence	hence	ADV
bam-6062	127	29	,	,	PUNCT
bam-6062	127	30	would	would	AUX
bam-6062	127	31	pave	pave	VERB
bam-6062	127	32	the	the	DET
bam-6062	127	33	way	way	NOUN
bam-6062	127	34	for	for	ADP
bam-6062	127	35	advancing	advance	VERB
bam-6062	127	36	the	the	DET
bam-6062	127	37	available	available	ADJ
bam-6062	127	38	technologies	technology	NOUN
bam-6062	127	39	.	.	PUNCT
bam-6062	128	1	the	the	DET
bam-6062	128	2	current	current	ADJ
bam-6062	128	3	method	method	NOUN
bam-6062	128	4	was	be	AUX
bam-6062	128	5	demonstrated	demonstrate	VERB
bam-6062	128	6	on	on	ADP
bam-6062	128	7	a	a	DET
bam-6062	128	8	foilbased	foilbase	VERB
bam-6062	128	9	low	low	ADJ
bam-6062	128	10	cost	cost	NOUN
bam-6062	128	11	technology	technology	NOUN
bam-6062	128	12	.	.	PUNCT
bam-6062	129	1	nevertheless	nevertheless	ADV
bam-6062	129	2	,	,	PUNCT
bam-6062	129	3	thin	thin	ADJ
bam-6062	129	4	-	-	PUNCT
bam-6062	129	5	film	film	NOUN
bam-6062	129	6	fabricated	fabricate	VERB
bam-6062	129	7	devices	device	NOUN
bam-6062	129	8	,	,	PUNCT
bam-6062	129	9	e.g.	e.g.	ADV
bam-6062	129	10	flexible	flexible	ADJ
bam-6062	129	11	polyimide	polyimide	NOUN
bam-6062	129	12	-	-	PUNCT
bam-6062	129	13	based	base	VERB
bam-6062	129	14	and	and	CCONJ
bam-6062	129	15	parylene	parylene	ADJ
bam-6062	129	16	substrates	substrate	NOUN
bam-6062	129	17	as	as	ADV
bam-6062	129	18	well	well	ADV
bam-6062	129	19	as	as	ADP
bam-6062	129	20	the	the	DET
bam-6062	129	21	rigid	rigid	ADJ
bam-6062	129	22	silicon	silicon	NOUN
bam-6062	129	23	devices	device	NOUN
bam-6062	129	24	,	,	PUNCT
bam-6062	129	25	can	can	AUX
bam-6062	129	26	also	also	ADV
bam-6062	129	27	benefit	benefit	VERB
bam-6062	129	28	from	from	ADP
bam-6062	129	29	this	this	DET
bam-6062	129	30	engineered	engineer	VERB
bam-6062	129	31	combination	combination	NOUN
bam-6062	129	32	of	of	ADP
bam-6062	129	33	techniques	technique	NOUN
bam-6062	129	34	.	.	PUNCT
bam-6062	130	1	the	the	DET
bam-6062	130	2	used	use	VERB
bam-6062	130	3	laser	laser	NOUN
bam-6062	130	4	spot	spot	NOUN
bam-6062	130	5	size	size	NOUN
bam-6062	130	6	is	be	AUX
bam-6062	130	7	of	of	ADP
bam-6062	130	8	35	35	NUM
bam-6062	130	9	µm	µm	NOUN
bam-6062	130	10	in	in	ADP
bam-6062	130	11	diameter	diameter	NOUN
bam-6062	130	12	,	,	PUNCT
bam-6062	130	13	and	and	CCONJ
bam-6062	130	14	could	could	AUX
bam-6062	130	15	be	be	AUX
bam-6062	130	16	reduced	reduce	VERB
bam-6062	130	17	with	with	ADP
bam-6062	130	18	the	the	DET
bam-6062	130	19	appropriate	appropriate	ADJ
bam-6062	130	20	optics	optic	NOUN
bam-6062	130	21	.	.	PUNCT
bam-6062	131	1	nevertheless	nevertheless	ADV
bam-6062	131	2	,	,	PUNCT
bam-6062	131	3	until	until	SCONJ
bam-6062	131	4	optimal	optimal	ADJ
bam-6062	131	5	material	material	NOUN
bam-6062	131	6	conditions	condition	NOUN
bam-6062	131	7	have	have	AUX
bam-6062	131	8	been	be	AUX
bam-6062	131	9	detected	detect	VERB
bam-6062	131	10	,	,	PUNCT
bam-6062	131	11	the	the	DET
bam-6062	131	12	presented	present	VERB
bam-6062	131	13	method	method	NOUN
bam-6062	131	14	remains	remain	VERB
bam-6062	131	15	an	an	DET
bam-6062	131	16	accessible	accessible	ADJ
bam-6062	131	17	way	way	NOUN
bam-6062	131	18	to	to	PART
bam-6062	131	19	further	far	ADV
bam-6062	131	20	study	study	VERB
bam-6062	131	21	the	the	DET
bam-6062	131	22	local	local	ADJ
bam-6062	131	23	pyrolysis	pyrolysis	NOUN
bam-6062	131	24	of	of	ADP
bam-6062	131	25	carbon	carbon	NOUN
bam-6062	131	26	into	into	ADP
bam-6062	131	27	a	a	DET
bam-6062	131	28	desired	desire	VERB
bam-6062	131	29	composition	composition	NOUN
bam-6062	131	30	for	for	ADP
bam-6062	131	31	the	the	DET
bam-6062	131	32	target	target	NOUN
bam-6062	131	33	application	application	NOUN
bam-6062	131	34	.	.	PUNCT
bam-6062	132	1	the	the	DET
bam-6062	132	2	proof	proof	NOUN
bam-6062	132	3	of	of	ADP
bam-6062	132	4	concept	concept	NOUN
bam-6062	132	5	was	be	AUX
bam-6062	132	6	provided	provide	VERB
bam-6062	132	7	.	.	PUNCT
bam-6062	133	1	however	however	ADV
bam-6062	133	2	,	,	PUNCT
bam-6062	133	3	more	more	ADJ
bam-6062	133	4	investigation	investigation	NOUN
bam-6062	133	5	is	be	AUX
bam-6062	133	6	yet	yet	ADV
bam-6062	133	7	needed	need	VERB
bam-6062	133	8	in	in	ADP
bam-6062	133	9	order	order	NOUN
bam-6062	133	10	to	to	PART
bam-6062	133	11	obtain	obtain	VERB
bam-6062	133	12	a	a	DET
bam-6062	133	13	better	well	ADJ
bam-6062	133	14	understanding	understanding	NOUN
bam-6062	133	15	of	of	ADP
bam-6062	133	16	the	the	DET
bam-6062	133	17	surface	surface	NOUN
bam-6062	133	18	characteristics	characteristic	NOUN
bam-6062	133	19	and	and	CCONJ
bam-6062	133	20	also	also	ADV
bam-6062	133	21	to	to	PART
bam-6062	133	22	address	address	VERB
bam-6062	133	23	the	the	DET
bam-6062	133	24	biocompatibility	biocompatibility	NOUN
bam-6062	133	25	and	and	CCONJ
bam-6062	133	26	biostability	biostability	NOUN
bam-6062	133	27	concerns	concern	NOUN
bam-6062	133	28	.	.	PUNCT
bam-6062	134	1	acknowledgments	acknowledgment	NOUN
bam-6062	134	2	the	the	DET
bam-6062	134	3	authors	author	NOUN
bam-6062	134	4	would	would	AUX
bam-6062	134	5	like	like	VERB
bam-6062	134	6	to	to	PART
bam-6062	134	7	thank	thank	VERB
bam-6062	134	8	m.	m.	NOUN
bam-6062	134	9	bruns	brun	NOUN
bam-6062	134	10	from	from	ADP
bam-6062	134	11	karlsruhe	karlsruhe	PROPN
bam-6062	134	12	nano	nano	PROPN
bam-6062	134	13	micro	micro	PROPN
bam-6062	134	14	facility	facility	PROPN
bam-6062	134	15	(	(	PUNCT
bam-6062	134	16	knmf	knmf	NOUN
bam-6062	134	17	)	)	PUNCT
bam-6062	134	18	,	,	PUNCT
bam-6062	134	19	a	a	DET
bam-6062	134	20	helmholtz	helmholtz	NOUN
bam-6062	134	21	research	research	NOUN
bam-6062	134	22	infrastructure	infrastructure	NOUN
bam-6062	134	23	at	at	ADP
bam-6062	134	24	kit	kit	PROPN
bam-6062	134	25	karlsruhe	karlsruhe	PROPN
bam-6062	134	26	institute	institute	PROPN
bam-6062	134	27	of	of	ADP
bam-6062	134	28	technology	technology	NOUN
bam-6062	134	29	for	for	ADP
bam-6062	134	30	the	the	DET
bam-6062	134	31	xps	xps	PROPN
bam-6062	134	32	measurements	measurement	NOUN
bam-6062	134	33	.	.	PUNCT
bam-6062	135	1	the	the	DET
bam-6062	135	2	used	use	VERB
bam-6062	135	3	kalpha+	kalpha+	X
bam-6062	135	4	instrument	instrument	PROPN
bam-6062	135	5	was	be	AUX
bam-6062	135	6	financially	financially	ADV
bam-6062	135	7	supported	support	VERB
bam-6062	135	8	by	by	ADP
bam-6062	135	9	the	the	DET
bam-6062	135	10	federal	federal	PROPN
bam-6062	135	11	ministry	ministry	PROPN
bam-6062	135	12	of	of	ADP
bam-6062	135	13	economics	economic	NOUN
bam-6062	135	14	and	and	CCONJ
bam-6062	135	15	technology	technology	NOUN
bam-6062	135	16	on	on	ADP
bam-6062	135	17	the	the	DET
bam-6062	135	18	basis	basis	NOUN
bam-6062	135	19	of	of	ADP
bam-6062	135	20	a	a	DET
bam-6062	135	21	decision	decision	NOUN
bam-6062	135	22	by	by	ADP
bam-6062	135	23	the	the	DET
bam-6062	135	24	german	german	ADJ
bam-6062	135	25	bundestag	bundestag	NOUN
bam-6062	135	26	.	.	PUNCT
bam-6062	136	1	the	the	DET
bam-6062	136	2	authors	author	NOUN
bam-6062	136	3	would	would	AUX
bam-6062	136	4	also	also	ADV
bam-6062	136	5	like	like	VERB
bam-6062	136	6	to	to	PART
bam-6062	136	7	thank	thank	VERB
bam-6062	136	8	the	the	DET
bam-6062	136	9	brainlinks	brainlink	NOUN
bam-6062	136	10	–	–	PUNCT
bam-6062	136	11	braintools	braintool	NOUN
bam-6062	136	12	cluster	cluster	NOUN
bam-6062	136	13	of	of	ADP
bam-6062	136	14	excellence	excellence	PROPN
bam-6062	136	15	(	(	PUNCT
bam-6062	136	16	german	german	ADJ
bam-6062	136	17	research	research	NOUN
bam-6062	136	18	foundation	foundation	PROPN
bam-6062	136	19	dfg	dfg	PROPN
bam-6062	136	20	,	,	PUNCT
bam-6062	136	21	exc	exc	NOUN
bam-6062	136	22	1086	1086	NUM
bam-6062	136	23	)	)	PUNCT
bam-6062	136	24	for	for	ADP
bam-6062	136	25	funding	fund	VERB
bam-6062	136	26	the	the	DET
bam-6062	136	27	research	research	NOUN
bam-6062	136	28	.	.	PUNCT
bam-6062	137	1	corresponding	correspond	VERB
bam-6062	137	2	author	author	NOUN
bam-6062	137	3	prof	prof	PROPN
bam-6062	137	4	.	.	PUNCT
bam-6062	138	1	thomas	thomas	PROPN
bam-6062	138	2	stieglitz	stieglitz	PROPN
bam-6062	138	3	,	,	PUNCT
bam-6062	138	4	laboratory	laboratory	NOUN
bam-6062	138	5	for	for	ADP
bam-6062	138	6	biomedical	biomedical	ADJ
bam-6062	138	7	microtechnology	microtechnology	NOUN
bam-6062	138	8	,	,	PUNCT
bam-6062	138	9	department	department	NOUN
bam-6062	138	10	of	of	ADP
bam-6062	138	11	microsystems	microsystem	NOUN
bam-6062	138	12	engineering	engineering	NOUN
bam-6062	138	13	,	,	PUNCT
bam-6062	138	14	university	university	NOUN
bam-6062	138	15	of	of	ADP
bam-6062	138	16	freiburg	freiburg	PROPN
bam-6062	138	17	,	,	PUNCT
bam-6062	138	18	germany	germany	PROPN
bam-6062	138	19	.	.	PUNCT
bam-6062	138	20	email	email	NOUN
bam-6062	138	21	:	:	PUNCT
bam-6062	138	22	stieglitz@imtek.uni-freiburg.de	stieglitz@imtek.uni-freiburg.de	NOUN
bam-6062	138	23	email	email	NOUN
bam-6062	138	24	of	of	ADP
bam-6062	138	25	coauthors	coauthor	NOUN
bam-6062	138	26	ana	ana	PROPN
bam-6062	138	27	oliveira	oliveira	PROPN
bam-6062	138	28	:	:	PUNCT
bam-6062	138	29	ana.oliveira@uranus.uni-freiburg.de	ana.oliveira@uranus.uni-freiburg.de	NUM
bam-6062	138	30	juan	juan	PROPN
bam-6062	138	31	ordonez	ordonez	PROPN
bam-6062	138	32	:	:	PUNCT
bam-6062	138	33	juan.ordonez.orellana@medtronic.com	juan.ordonez.orellana@medtronic.com	X
bam-6062	139	1	danesh	danesh	PROPN
bam-6062	139	2	ashouri	ashouri	PROPN
bam-6062	139	3	vajari	vajari	PROPN
bam-6062	139	4	:	:	PUNCT
bam-6062	139	5	danesh.ashouri@imtek.unifreiburg.de	danesh.ashouri@imtek.unifreiburg.de	ADJ
bam-6062	139	6	max	max	PROPN
bam-6062	139	7	eickenscheidt	eickenscheidt	PROPN
bam-6062	139	8	:	:	PUNCT
bam-6062	139	9	max.eickenscheidt@imtek.unifreiburg.de	max.eickenscheidt@imtek.unifreiburg.de	PROPN
bam-6062	139	10	references	reference	NOUN
bam-6062	139	11	1	1	NUM
bam-6062	139	12	.	.	PUNCT
bam-6062	140	1	hatsopoulos	hatsopoulos	PROPN
bam-6062	140	2	n	n	CCONJ
bam-6062	140	3	,	,	PUNCT
bam-6062	140	4	donoghue	donoghue	PROPN
bam-6062	140	5	j.	j.	PROPN
bam-6062	140	6	the	the	DET
bam-6062	140	7	science	science	NOUN
bam-6062	140	8	of	of	ADP
bam-6062	140	9	neural	neural	ADJ
bam-6062	140	10	interface	interface	NOUN
bam-6062	140	11	systems	system	NOUN
bam-6062	140	12	.	.	PUNCT
bam-6062	141	1	annu	annu	PROPN
bam-6062	141	2	rev	rev	VERB
bam-6062	141	3	neurosci	neurosci	PROPN
bam-6062	141	4	2009;32:249–66	2009;32:249–66	X
bam-6062	141	5	.	.	PROPN
bam-6062	142	1	2	2	NUM
bam-6062	142	2	.	.	X
bam-6062	142	3	ordonez	ordonez	PROPN
bam-6062	142	4	j	j	PROPN
bam-6062	142	5	,	,	PUNCT
bam-6062	142	6	schuettler	schuettler	NOUN
bam-6062	142	7	m	m	PROPN
bam-6062	142	8	,	,	PUNCT
bam-6062	142	9	boehler	boehler	NOUN
bam-6062	142	10	c	c	NOUN
bam-6062	142	11	,	,	PUNCT
bam-6062	142	12	boretius	boretius	PROPN
bam-6062	142	13	t	t	PROPN
bam-6062	142	14	,	,	PUNCT
bam-6062	142	15	stieglitz	stieglitz	PROPN
bam-6062	142	16	t.	t.	PROPN
bam-6062	142	17	thin	thin	PROPN
bam-6062	142	18	films	film	NOUN
bam-6062	142	19	and	and	CCONJ
bam-6062	142	20	microelectrode	microelectrode	NOUN
bam-6062	142	21	arrays	array	NOUN
bam-6062	142	22	for	for	ADP
bam-6062	142	23	neuroprosthetics	neuroprosthetic	NOUN
bam-6062	142	24	.	.	PUNCT
bam-6062	143	1	mrs	mrs	PROPN
bam-6062	143	2	bull	bull	PROPN
bam-6062	143	3	2012;37:590–8	2012;37:590–8	NUM
bam-6062	143	4	.	.	PUNCT
bam-6062	144	1	3	3	NUM
bam-6062	144	2	.	.	X
bam-6062	144	3	kassegne	kassegne	PROPN
bam-6062	144	4	s	s	PROPN
bam-6062	144	5	,	,	PUNCT
bam-6062	144	6	vomero	vomero	PROPN
bam-6062	144	7	m	m	PROPN
bam-6062	144	8	,	,	PUNCT
bam-6062	144	9	gavuglio	gavuglio	PROPN
bam-6062	144	10	r	r	NOUN
bam-6062	144	11	,	,	PUNCT
bam-6062	144	12	et	et	PROPN
bam-6062	144	13	al	al	PROPN
bam-6062	144	14	.	.	PUNCT
bam-6062	144	15	electrical	electrical	ADJ
bam-6062	144	16	impedance	impedance	NOUN
bam-6062	144	17	,	,	PUNCT
bam-6062	144	18	electrochemistry	electrochemistry	NOUN
bam-6062	144	19	,	,	PUNCT
bam-6062	144	20	mechanical	mechanical	ADJ
bam-6062	144	21	stiffness	stiffness	NOUN
bam-6062	144	22	,	,	PUNCT
bam-6062	144	23	and	and	CCONJ
bam-6062	144	24	hardness	hardness	ADJ
bam-6062	144	25	tunability	tunability	NOUN
bam-6062	144	26	in	in	ADP
bam-6062	144	27	fig	fig	NOUN
bam-6062	144	28	9	9	NUM
bam-6062	144	29	.	.	PUNCT
bam-6062	144	30	voltage	voltage	NOUN
bam-6062	144	31	responses	response	NOUN
bam-6062	144	32	of	of	ADP
bam-6062	144	33	the	the	DET
bam-6062	144	34	pyrolyzed	pyrolyzed	ADJ
bam-6062	144	35	material	material	NOUN
bam-6062	144	36	without	without	ADP
bam-6062	144	37	stress	stress	NOUN
bam-6062	144	38	exposure	exposure	NOUN
bam-6062	144	39	(	(	PUNCT
bam-6062	144	40	after	after	ADP
bam-6062	144	41	6	6	NUM
bam-6062	144	42	cv	cv	PROPN
bam-6062	144	43	cycles	cycle	NOUN
bam-6062	144	44	)	)	PUNCT
bam-6062	144	45	,	,	PUNCT
bam-6062	144	46	after	after	ADP
bam-6062	144	47	70	70	NUM
bam-6062	144	48	cv	cv	PROPN
bam-6062	144	49	cycles	cycle	NOUN
bam-6062	144	50	and	and	CCONJ
bam-6062	144	51	of	of	ADP
bam-6062	144	52	the	the	DET
bam-6062	144	53	pt	pt	PROPN
bam-6062	144	54	:	:	PUNCT
bam-6062	144	55	ir	ir	PROPN
bam-6062	144	56	reference	reference	NOUN
bam-6062	144	57	electrode	electrode	NOUN
bam-6062	144	58	to	to	ADP
bam-6062	144	59	200	200	NUM
bam-6062	144	60	μa	μa	NOUN
bam-6062	144	61	,	,	PUNCT
bam-6062	144	62	200	200	NUM
bam-6062	144	63	μs	μs	NUM
bam-6062	144	64	,	,	PUNCT
bam-6062	144	65	biphasic	biphasic	ADJ
bam-6062	144	66	pulses	pulse	NOUN
bam-6062	144	67	.	.	PUNCT
bam-6062	145	1	laser	laser	NOUN
bam-6062	145	2	-	-	PUNCT
bam-6062	145	3	induced	induce	VERB
bam-6062	145	4	carbon	carbon	NOUN
bam-6062	145	5	pyrolysis	pyrolysis	NOUN
bam-6062	145	6	of	of	ADP
bam-6062	145	7	electrodes	electrode	NOUN
bam-6062	145	8	for	for	ADP
bam-6062	145	9	neural	neural	ADJ
bam-6062	145	10	interface	interface	NOUN
bam-6062	145	11	systems	system	NOUN
bam-6062	145	12	eur	eur	PROPN
bam-6062	145	13	j	j	PROPN
bam-6062	145	14	transl	transl	PROPN
bam-6062	145	15	myol	myol	NOUN
bam-6062	145	16	26	26	NUM
bam-6062	145	17	(	(	PUNCT
bam-6062	145	18	3	3	NUM
bam-6062	145	19	):	):	PUNCT
bam-6062	145	20	181	181	NUM
bam-6062	145	21	-	-	SYM
bam-6062	145	22	186	186	NUM
bam-6062	145	23	186	186	NUM
bam-6062	145	24	glassy	glassy	NOUN
bam-6062	145	25	carbon	carbon	NOUN
bam-6062	145	26	mems	mem	NOUN
bam-6062	145	27	ecog	ecog	VERB
bam-6062	145	28	electrodes.microelectron	electrodes.microelectron	PROPN
bam-6062	145	29	eng	eng	PROPN
bam-6062	145	30	2015;133:36–44	2015;133:36–44	NUM
bam-6062	145	31	.	.	PROPN
bam-6062	145	32	4	4	NUM
bam-6062	145	33	.	.	X
bam-6062	146	1	vitale	vitale	PROPN
bam-6062	146	2	f	f	PROPN
bam-6062	146	3	,	,	PUNCT
bam-6062	146	4	summerson	summerson	PROPN
bam-6062	146	5	b	b	PROPN
bam-6062	146	6	,	,	PUNCT
bam-6062	146	7	aazhang	aazhang	PROPN
bam-6062	146	8	sr	sr	PROPN
bam-6062	146	9	,	,	PUNCT
bam-6062	146	10	et	et	PROPN
bam-6062	146	11	al	al	PROPN
bam-6062	146	12	.	.	PROPN
bam-6062	146	13	neural	neural	ADJ
bam-6062	146	14	stimulation	stimulation	NOUN
bam-6062	146	15	and	and	CCONJ
bam-6062	146	16	recording	recording	NOUN
bam-6062	146	17	with	with	ADP
bam-6062	146	18	bidirectional	bidirectional	ADJ
bam-6062	146	19	,	,	PUNCT
bam-6062	146	20	soft	soft	ADJ
bam-6062	146	21	carbon	carbon	NOUN
bam-6062	146	22	nanotube	nanotube	NOUN
bam-6062	146	23	fiber	fiber	NOUN
bam-6062	146	24	microelectrodes	microelectrode	NOUN
bam-6062	146	25	.	.	PUNCT
bam-6062	147	1	acs	acs	PROPN
bam-6062	147	2	nano	nano	VERB
bam-6062	147	3	2015;9:4465–74	2015;9:4465–74	NUM
bam-6062	147	4	.	.	NOUN
bam-6062	147	5	5	5	NUM
bam-6062	147	6	.	.	PUNCT
bam-6062	148	1	cogan	cogan	PROPN
bam-6062	148	2	sf	sf	PROPN
bam-6062	148	3	.	.	PUNCT
bam-6062	148	4	neural	neural	ADJ
bam-6062	148	5	stimulation	stimulation	NOUN
bam-6062	148	6	and	and	CCONJ
bam-6062	148	7	recording	recording	NOUN
bam-6062	148	8	electrodes	electrode	NOUN
bam-6062	148	9	.	.	PUNCT
bam-6062	149	1	annu	annu	PROPN
bam-6062	149	2	rev	rev	AUX
bam-6062	149	3	biomed	biome	VERB
bam-6062	149	4	eng	eng	PROPN
bam-6062	149	5	10	10	NUM
bam-6062	149	6	,	,	PUNCT
bam-6062	149	7	pp	pp	ADJ
bam-6062	149	8	.	.	PUNCT
bam-6062	150	1	275	275	NUM
bam-6062	150	2	–	–	PUNCT
bam-6062	150	3	309	309	NUM
bam-6062	150	4	,	,	PUNCT
bam-6062	150	5	2008	2008	NUM
bam-6062	150	6	.	.	PUNCT
bam-6062	151	1	6	6	NUM
bam-6062	151	2	.	.	NUM
bam-6062	151	3	madou	madou	PROPN
bam-6062	151	4	m	m	PROPN
bam-6062	151	5	,	,	PUNCT
bam-6062	151	6	sharma	sharma	PROPN
bam-6062	151	7	s.	s.	PROPN
bam-6062	151	8	micro	micro	PROPN
bam-6062	151	9	and	and	CCONJ
bam-6062	151	10	nano	nano	NOUN
bam-6062	151	11	patterning	patterning	NOUN
bam-6062	151	12	of	of	ADP
bam-6062	151	13	carbon	carbon	NOUN
bam-6062	151	14	electrodes	electrode	NOUN
bam-6062	151	15	for	for	ADP
bam-6062	151	16	biomems	biomem	NOUN
bam-6062	151	17	bioinspired	bioinspire	VERB
bam-6062	151	18	biomim	biomim	NOUN
bam-6062	151	19	nanobiomaterials	nanobiomaterial	NOUN
bam-6062	151	20	.	.	PUNCT
bam-6062	152	1	2012;1:252–65	2012;1:252–65	X
bam-6062	152	2	.	.	PUNCT
bam-6062	153	1	7	7	X
bam-6062	153	2	.	.	X
bam-6062	153	3	mccreery	mccreery	PROPN
bam-6062	153	4	rl	rl	PROPN
bam-6062	153	5	.	.	PROPN
bam-6062	153	6	advanced	advanced	ADJ
bam-6062	153	7	carbon	carbon	NOUN
bam-6062	153	8	electrode	electrode	NOUN
bam-6062	153	9	materials	material	NOUN
bam-6062	153	10	for	for	ADP
bam-6062	153	11	molecular	molecular	ADJ
bam-6062	153	12	electrochemistry	electrochemistry	NOUN
bam-6062	153	13	.	.	PUNCT
bam-6062	154	1	chem	chem	PROPN
bam-6062	154	2	rev	rev	VERB
bam-6062	154	3	2008;108:2646–87	2008;108:2646–87	NUM
bam-6062	154	4	.	.	PUNCT
bam-6062	155	1	8	8	NUM
bam-6062	155	2	.	.	PUNCT
bam-6062	155	3	dekanski	dekanski	PROPN
bam-6062	155	4	a	a	PROPN
bam-6062	155	5	,	,	PUNCT
bam-6062	155	6	stevanović	stevanović	PROPN
bam-6062	155	7	j	j	PROPN
bam-6062	155	8	,	,	PUNCT
bam-6062	155	9	stevanović	stevanović	PROPN
bam-6062	155	10	r	r	PROPN
bam-6062	155	11	,	,	PUNCT
bam-6062	155	12	et	et	PROPN
bam-6062	155	13	al	al	PROPN
bam-6062	155	14	.	.	PUNCT
bam-6062	155	15	glassy	glassy	NOUN
bam-6062	155	16	carbon	carbon	NOUN
bam-6062	155	17	electrodes	electrode	NOUN
bam-6062	155	18	.	.	PUNCT
bam-6062	156	1	carbon	carbon	NOUN
bam-6062	156	2	ny	ny	PROPN
bam-6062	156	3	2001;39:1195–1205	2001;39:1195–1205	PROPN
bam-6062	156	4	.	.	PROPN
bam-6062	157	1	9	9	NUM
bam-6062	157	2	.	.	PUNCT
bam-6062	157	3	narayan	narayan	PROPN
bam-6062	157	4	j	j	PROPN
bam-6062	157	5	,	,	PUNCT
bam-6062	157	6	bhaumik	bhaumik	ADJ
bam-6062	157	7	a.	a.	NOUN
bam-6062	157	8	novel	novel	NOUN
bam-6062	157	9	phase	phase	NOUN
bam-6062	157	10	of	of	ADP
bam-6062	157	11	carbon	carbon	NOUN
bam-6062	157	12	,	,	PUNCT
bam-6062	157	13	ferromagnetism	ferromagnetism	NOUN
bam-6062	157	14	and	and	CCONJ
bam-6062	157	15	conversion	conversion	NOUN
bam-6062	157	16	into	into	ADP
bam-6062	157	17	diamond	diamond	NOUN
bam-6062	157	18	.	.	PUNCT
bam-6062	158	1	j	j	PROPN
bam-6062	158	2	appl	appl	PROPN
bam-6062	158	3	phys	phy	NOUN
bam-6062	158	4	2015;118:1–10	2015;118:1–10	NUM
bam-6062	158	5	.	.	PUNCT
bam-6062	159	1	10	10	NUM
bam-6062	159	2	.	.	PUNCT
bam-6062	159	3	wynn	wynn	PROPN
bam-6062	159	4	gh	gh	PROPN
bam-6062	159	5	,	,	PUNCT
bam-6062	159	6	iii	iii	PROPN
bam-6062	159	7	awf	awf	PROPN
bam-6062	159	8	.	.	PROPN
bam-6062	159	9	development	development	NOUN
bam-6062	159	10	and	and	CCONJ
bam-6062	159	11	characterization	characterization	NOUN
bam-6062	159	12	of	of	ADP
bam-6062	159	13	electrochemical	electrochemical	ADJ
bam-6062	159	14	devices	device	NOUN
bam-6062	159	15	using	use	VERB
bam-6062	159	16	ultraviolet	ultraviolet	ADJ
bam-6062	159	17	laser	laser	NOUN
bam-6062	159	18	induced	induce	VERB
bam-6062	159	19	carbonization	carbonization	NOUN
bam-6062	159	20	of	of	ADP
bam-6062	159	21	polyimide	polyimide	NOUN
bam-6062	159	22	films	film	NOUN
bam-6062	159	23	.	.	PUNCT
bam-6062	160	1	j	j	PROPN
bam-6062	160	2	electrochem	electrochem	PROPN
bam-6062	160	3	soc	soc	PROPN
bam-6062	160	4	1997;144:3769–72	1997;144:3769–72	NUM
bam-6062	160	5	.	.	PUNCT
bam-6062	161	1	11	11	NUM
bam-6062	161	2	.	.	X
bam-6062	161	3	suaning	suane	VERB
bam-6062	161	4	gj	gj	PROPN
bam-6062	161	5	,	,	PUNCT
bam-6062	161	6	schuettler	schuettler	NOUN
bam-6062	161	7	m	m	PROPN
bam-6062	161	8	,	,	PUNCT
bam-6062	161	9	ordonez	ordonez	PROPN
bam-6062	161	10	js	js	PROPN
bam-6062	161	11	,	,	PUNCT
bam-6062	161	12	lovell	lovell	PROPN
bam-6062	161	13	nh	nh	PROPN
bam-6062	161	14	.	.	PROPN
bam-6062	161	15	fabrication	fabrication	NOUN
bam-6062	161	16	of	of	ADP
bam-6062	161	17	multi	multi	ADJ
bam-6062	161	18	-	-	NOUN
bam-6062	161	19	layer	layer	ADJ
bam-6062	161	20	,	,	PUNCT
bam-6062	161	21	high	high	ADJ
bam-6062	161	22	-	-	PUNCT
bam-6062	161	23	density	density	NOUN
bam-6062	161	24	microelectrode	microelectrode	NOUN
bam-6062	161	25	arrays	array	VERB
bam-6062	161	26	for	for	ADP
bam-6062	161	27	neural	neural	ADJ
bam-6062	161	28	stimulation	stimulation	NOUN
bam-6062	161	29	and	and	CCONJ
bam-6062	161	30	biosignal	biosignal	NOUN
bam-6062	161	31	recording	recording	NOUN
bam-6062	161	32	,	,	PUNCT
bam-6062	161	33	proc	proc	NOUN
bam-6062	161	34	.	.	PUNCT
bam-6062	162	1	3rd	3rd	ADJ
bam-6062	162	2	int	int	NOUN
bam-6062	162	3	.	.	PUNCT
bam-6062	163	1	ieee	ieee	PROPN
bam-6062	163	2	embs	embs	PROPN
bam-6062	163	3	conf	conf	PROPN
bam-6062	163	4	neural	neural	ADJ
bam-6062	163	5	eng	eng	PROPN
bam-6062	163	6	2007	2007	NUM
bam-6062	163	7	,	,	PUNCT
bam-6062	163	8	5–8	5–8	NUM
bam-6062	163	9	.	.	PROPN
bam-6062	163	10	12	12	NUM
bam-6062	163	11	.	.	PUNCT
bam-6062	163	12	kohler	kohler	PROPN
bam-6062	163	13	f	f	PROPN
bam-6062	163	14	,	,	PUNCT
bam-6062	163	15	schuettler	schuettler	NOUN
bam-6062	163	16	m	m	PROPN
bam-6062	163	17	,	,	PUNCT
bam-6062	163	18	ordonez	ordonez	PROPN
bam-6062	163	19	j	j	PROPN
bam-6062	163	20	,	,	PUNCT
bam-6062	163	21	stieglitz	stieglitz	PROPN
bam-6062	163	22	t.	t.	PROPN
bam-6062	163	23	laser	laser	PROPN
bam-6062	163	24	microfabrication	microfabrication	NOUN
bam-6062	163	25	of	of	ADP
bam-6062	163	26	neural	neural	ADJ
bam-6062	163	27	electrode	electrode	NOUN
bam-6062	163	28	arrays	array	VERB
bam-6062	163	29	:	:	PUNCT
bam-6062	163	30	comparison	comparison	NOUN
bam-6062	163	31	of	of	ADP
bam-6062	163	32	nanosecond	nanosecond	NOUN
bam-6062	163	33	and	and	CCONJ
bam-6062	163	34	picosecond	picosecond	NOUN
bam-6062	163	35	laser	laser	NOUN
bam-6062	163	36	technology	technology	NOUN
bam-6062	163	37	.	.	PUNCT
bam-6062	164	1	proc	proc	PROPN
bam-6062	164	2	ifess	ifess	NOUN
bam-6062	164	3	2011;102:99–101	2011;102:99–101	NUM
bam-6062	164	4	.	.	PROPN
bam-6062	164	5	13	13	NUM
bam-6062	164	6	.	.	PUNCT
bam-6062	164	7	mortazavi	mortazavi	PROPN
bam-6062	164	8	sz	sz	PROPN
bam-6062	164	9	,	,	PUNCT
bam-6062	164	10	parvin	parvin	PROPN
bam-6062	164	11	p	p	PROPN
bam-6062	164	12	,	,	PUNCT
bam-6062	164	13	mousavi	mousavi	PROPN
bam-6062	164	14	pour	pour	PROPN
bam-6062	164	15	mr	mr	PROPN
bam-6062	164	16	,	,	PUNCT
bam-6062	164	17	et	et	PROPN
bam-6062	164	18	al	al	PROPN
bam-6062	164	19	.	.	PROPN
bam-6062	164	20	time	time	NOUN
bam-6062	164	21	-	-	PUNCT
bam-6062	164	22	resolved	resolve	VERB
bam-6062	164	23	evolution	evolution	NOUN
bam-6062	164	24	of	of	ADP
bam-6062	164	25	metal	metal	NOUN
bam-6062	164	26	plasma	plasma	NOUN
bam-6062	164	27	induced	induce	VERB
bam-6062	164	28	by	by	ADP
bam-6062	164	29	q	q	ADV
bam-6062	164	30	-	-	PUNCT
bam-6062	164	31	switched	switch	VERB
bam-6062	164	32	nd	nd	PRON
bam-6062	164	33	:	:	PUNCT
bam-6062	164	34	yag	yag	NOUN
bam-6062	164	35	and	and	CCONJ
bam-6062	164	36	arf	arf	NOUN
bam-6062	164	37	-	-	PUNCT
bam-6062	164	38	excimer	excimer	NOUN
bam-6062	164	39	lasers	laser	NOUN
bam-6062	164	40	.	.	PUNCT
bam-6062	165	1	opt	opt	VERB
bam-6062	165	2	laser	laser	NOUN
bam-6062	165	3	technol	technol	NOUN
bam-6062	165	4	2014;62:32–9	2014;62:32–9	PROPN
bam-6062	165	5	.	.	PUNCT
bam-6062	165	6	14	14	NUM
bam-6062	165	7	.	.	PUNCT
bam-6062	166	1	parry	parry	PROPN
bam-6062	166	2	kl	kl	PROPN
bam-6062	166	3	,	,	PUNCT
bam-6062	166	4	shard	shard	NOUN
bam-6062	166	5	a	a	PRON
bam-6062	166	6	,	,	PUNCT
bam-6062	166	7	short	short	ADJ
bam-6062	166	8	r	r	NOUN
bam-6062	166	9	,	,	PUNCT
bam-6062	166	10	et	et	PROPN
bam-6062	166	11	al	al	PROPN
bam-6062	166	12	.	.	PROPN
bam-6062	166	13	rxps	rxps	PROPN
bam-6062	166	14	characterisation	characterisation	NOUN
bam-6062	166	15	of	of	ADP
bam-6062	166	16	plasma	plasma	NOUN
bam-6062	166	17	polymerised	polymerise	VERB
bam-6062	166	18	surface	surface	NOUN
bam-6062	166	19	chemical	chemical	NOUN
bam-6062	166	20	gradients	gradient	NOUN
bam-6062	166	21	.	.	PUNCT
bam-6062	167	1	surf	surf	PROPN
bam-6062	167	2	interface	interface	PROPN
bam-6062	167	3	anal	anal	PROPN
bam-6062	167	4	2006;38:1497–1504	2006;38:1497–1504	NOUN
bam-6062	167	5	.	.	PUNCT
bam-6062	167	6	15	15	NUM
bam-6062	167	7	.	.	PUNCT
bam-6062	168	1	scofield	scofield	PROPN
bam-6062	168	2	jh	jh	PROPN
bam-6062	168	3	.	.	PUNCT
bam-6062	169	1	hartree	hartree	ADJ
bam-6062	169	2	-	-	PUNCT
bam-6062	169	3	slater	slater	NOUN
bam-6062	169	4	subshell	subshell	PROPN
bam-6062	169	5	photoionization	photoionization	PROPN
bam-6062	169	6	cross	cross	NOUN
bam-6062	170	1	-	-	NOUN
bam-6062	171	1	sections	section	NOUN
bam-6062	171	2	at	at	ADP
bam-6062	171	3	1254	1254	NUM
bam-6062	171	4	and	and	CCONJ
bam-6062	171	5	1487	1487	NUM
bam-6062	171	6	ev	ev	PROPN
bam-6062	171	7	.	.	PROPN
bam-6062	172	1	j	j	PROPN
bam-6062	172	2	electron	electron	PROPN
bam-6062	172	3	spectros	spectros	PROPN
bam-6062	172	4	relat	relat	PROPN
bam-6062	172	5	phenomena	phenomena	PROPN
bam-6062	172	6	1976;8:129–37	1976;8:129–37	NUM
bam-6062	172	7	.	.	PUNCT
bam-6062	173	1	16	16	NUM
bam-6062	173	2	.	.	PUNCT
bam-6062	174	1	tanuma	tanuma	PROPN
bam-6062	174	2	s	s	PROPN
bam-6062	174	3	,	,	PUNCT
bam-6062	174	4	powell	powell	PROPN
bam-6062	174	5	cj	cj	PROPN
bam-6062	174	6	,	,	PUNCT
bam-6062	174	7	penn	penn	PROPN
bam-6062	174	8	p.	p.	PROPN
bam-6062	174	9	calculations	calculation	NOUN
bam-6062	174	10	of	of	ADP
bam-6062	174	11	electron	electron	NOUN
bam-6062	174	12	inelastic	inelastic	ADJ
bam-6062	174	13	mean	mean	NOUN
bam-6062	174	14	free	free	ADJ
bam-6062	174	15	paths	path	NOUN
bam-6062	174	16	.	.	PUNCT
bam-6062	175	1	v.	v.	ADP
bam-6062	175	2	data	datum	NOUN
bam-6062	175	3	for	for	ADP
bam-6062	175	4	14	14	NUM
bam-6062	175	5	organic	organic	ADJ
bam-6062	175	6	compounds	compound	NOUN
bam-6062	175	7	over	over	ADP
bam-6062	175	8	the	the	DET
bam-6062	175	9	50–2000	50–2000	NUM
bam-6062	175	10	ev	ev	NOUN
bam-6062	175	11	range	range	NOUN
bam-6062	175	12	.	.	PUNCT
bam-6062	176	1	surf	surf	NOUN
bam-6062	176	2	interface	interface	PROPN
bam-6062	176	3	anal	anal	PROPN
bam-6062	176	4	1994;21:165–76	1994;21:165–76	NUM
bam-6062	176	5	.	.	PUNCT
bam-6062	177	1	17	17	NUM
bam-6062	177	2	.	.	PUNCT
bam-6062	178	1	zydziak	zydziak	PROPN
bam-6062	178	2	n	n	CCONJ
bam-6062	178	3	,	,	PUNCT
bam-6062	178	4	christof	christof	PROPN
bam-6062	178	5	h	h	PROPN
bam-6062	178	6	,	,	PUNCT
bam-6062	178	7	bruns	brun	NOUN
bam-6062	178	8	m.	m.	NOUN
bam-6062	178	9	,	,	PUNCT
bam-6062	178	10	barnerkowollik	barnerkowollik	VERB
bam-6062	178	11	c.	c.	PROPN
bam-6062	178	12	one	one	NUM
bam-6062	178	13	-	-	PUNCT
bam-6062	178	14	step	step	NOUN
bam-6062	178	15	functionalization	functionalization	NOUN
bam-6062	178	16	of	of	ADP
bam-6062	178	17	singlewalled	singlewalle	VERB
bam-6062	178	18	carbon	carbon	NOUN
bam-6062	178	19	nanotubes	nanotube	NOUN
bam-6062	178	20	(	(	PUNCT
bam-6062	178	21	swcnts	swcnt	NOUN
bam-6062	178	22	)	)	PUNCT
bam-6062	178	23	with	with	ADP
bam-6062	178	24	cyclopentadienyl	cyclopentadienyl	NOUN
bam-6062	178	25	-	-	PUNCT
bam-6062	178	26	capped	cap	VERB
bam-6062	178	27	macromolecules	macromolecule	NOUN
bam-6062	178	28	via	via	ADP
bam-6062	178	29	diels	diel	NOUN
bam-6062	178	30	à	à	X
bam-6062	178	31	alder	alder	NOUN
bam-6062	178	32	chemistry	chemistry	NOUN
bam-6062	178	33	.	.	PUNCT
bam-6062	179	1	2011;44:3374–338	2011;44:3374–338	NUM
bam-6062	179	2	.	.	PUNCT