id	sid	eid	entity	type
fuelectenerg-198	1	1	27	CARDINAL
fuelectenerg-198	1	2	2, june 2014	DATE
fuelectenerg-198	2	1	259 273	CARDINAL
fuelectenerg-198	2	2	10.2298	CARDINAL
fuelectenerg-198	2	3	nenad novkovski institute of physics	ORG
fuelectenerg-198	2	4	cyril	PERSON
fuelectenerg-198	2	5	methodius	PERSON
fuelectenerg-198	2	6	1000	CARDINAL
fuelectenerg-198	2	7	skopje	GPE
fuelectenerg-198	2	8	macedonia	GPE
fuelectenerg-198	5	1	al	ORG
fuelectenerg-198	5	2	w	GPE
fuelectenerg-198	5	3	mo	GPE
fuelectenerg-198	8	1	1	CARDINAL
fuelectenerg-198	11	1	1]-[13	CARDINAL
fuelectenerg-198	12	1	february 5, 2014	DATE
fuelectenerg-198	12	2	nenad novkovski institute of physics	ORG
fuelectenerg-198	12	3	cyril	PERSON
fuelectenerg-198	12	4	methodius	PERSON
fuelectenerg-198	12	5	1000	CARDINAL
fuelectenerg-198	12	6	skopje	GPE
fuelectenerg-198	12	7	macedonia	GPE
fuelectenerg-198	12	8	260	CARDINAL
fuelectenerg-198	12	9	14	CARDINAL
fuelectenerg-198	13	1	hfo2	ORG
fuelectenerg-198	13	2	15][30	CARDINAL
fuelectenerg-198	14	1	31	CARDINAL
fuelectenerg-198	15	1	32	CARDINAL
fuelectenerg-198	17	1	2	CARDINAL
fuelectenerg-198	17	2	2.1	CARDINAL
fuelectenerg-198	17	3	al gate	PERSON
fuelectenerg-198	18	1	1	CARDINAL
fuelectenerg-198	18	2	4	CARDINAL
fuelectenerg-198	18	3	ec	ORG
fuelectenerg-198	18	4	1.12	CARDINAL
fuelectenerg-198	18	5	sio2	PERSON
fuelectenerg-198	18	6	ev  e '	PERSON
fuelectenerg-198	18	7	k s  h '	PERSON
fuelectenerg-198	19	1	1	CARDINAL
fuelectenerg-198	20	1	1	CARDINAL
fuelectenerg-198	22	1	s	ORG
fuelectenerg-198	23	1	al gate	PERSON
fuelectenerg-198	23	2	sio2	ORG
fuelectenerg-198	23	3	1	CARDINAL
fuelectenerg-198	25	1	0.5	CARDINAL
fuelectenerg-198	25	2	1	CARDINAL
fuelectenerg-198	25	3	ev	ORG
fuelectenerg-198	25	4	s	PERSON
fuelectenerg-198	25	5	ev	ORG
fuelectenerg-198	25	6	8.97	CARDINAL
fuelectenerg-198	25	7	1.51 0.29	CARDINAL
fuelectenerg-198	25	8	261 2.2	CARDINAL
fuelectenerg-198	31	1	sio2	ORG
fuelectenerg-198	32	1	sio2	ORG
fuelectenerg-198	39	1	sio2	ORG
fuelectenerg-198	43	1	one	CARDINAL
fuelectenerg-198	44	1	2	CARDINAL
fuelectenerg-198	45	1	first	ORDINAL
fuelectenerg-198	47	1	0.2 ev	PERCENT
fuelectenerg-198	47	2	35	CARDINAL
fuelectenerg-198	47	3	0.8 ev	PERCENT
fuelectenerg-198	47	4	first	ORDINAL
fuelectenerg-198	47	5	36	CARDINAL
fuelectenerg-198	48	1	0.29	CARDINAL
fuelectenerg-198	49	1	al-gate	PERSON
fuelectenerg-198	49	2	100	CARDINAL
fuelectenerg-198	52	1	only 0.29	CARDINAL
fuelectenerg-198	55	1	sio2	ORG
fuelectenerg-198	58	1	37]-[39	CARDINAL
fuelectenerg-198	60	1	about 0.6	CARDINAL
fuelectenerg-198	61	1	40	CARDINAL
fuelectenerg-198	63	1	one	CARDINAL
fuelectenerg-198	63	2	41	CARDINAL
fuelectenerg-198	64	1	fig	ORG
fuelectenerg-198	65	1	2	CARDINAL
fuelectenerg-198	65	2	sio2	GPE
fuelectenerg-198	67	1	42	CARDINAL
fuelectenerg-198	69	1	2.2	CARDINAL
fuelectenerg-198	69	2	sio2	ORG
fuelectenerg-198	71	1	3	CARDINAL
fuelectenerg-198	72	1	sio2	PRODUCT
fuelectenerg-198	72	2	263	CARDINAL
fuelectenerg-198	73	1	3	CARDINAL
fuelectenerg-198	73	2	sio2	ORG
fuelectenerg-198	74	1	sio2	ORG
fuelectenerg-198	75	1	sio2	PRODUCT
fuelectenerg-198	76	1	43	CARDINAL
fuelectenerg-198	77	1	sio2	ORG
fuelectenerg-198	78	1	zero	CARDINAL
fuelectenerg-198	79	1	44	CARDINAL
fuelectenerg-198	82	1	4	CARDINAL
fuelectenerg-198	83	1	45	CARDINAL
fuelectenerg-198	84	1	fig	ORG
fuelectenerg-198	85	1	4	CARDINAL
fuelectenerg-198	85	2	sio2	ORG
fuelectenerg-198	85	3	sio2	PERSON
fuelectenerg-198	85	4	sio2	PERSON
fuelectenerg-198	85	5	sio2	ORG
fuelectenerg-198	85	6	264	CARDINAL
fuelectenerg-198	88	1	sio2	PERSON
fuelectenerg-198	88	2	100	CARDINAL
fuelectenerg-198	89	1	sio2	ORG
fuelectenerg-198	89	2	4	CARDINAL
fuelectenerg-198	89	3	46	CARDINAL
fuelectenerg-198	90	1	first	ORDINAL
fuelectenerg-198	91	1	4	CARDINAL
fuelectenerg-198	93	1	2.3	CARDINAL
fuelectenerg-198	94	1	sio2	PERSON
fuelectenerg-198	94	2	jhc	PERSON
fuelectenerg-198	94	3	1	CARDINAL
fuelectenerg-198	94	4	if	NORP
fuelectenerg-198	95	1	jtd	ORG
fuelectenerg-198	95	2		GPE
fuelectenerg-198	95	3		GPE
fuelectenerg-198	96	1		GPE
fuelectenerg-198	97	1		GPE
fuelectenerg-198	97	2		GPE
fuelectenerg-198	98	1		ORG
fuelectenerg-198	99	1		GPE
fuelectenerg-198	100	1		GPE
fuelectenerg-198	102	1		GPE
fuelectenerg-198	103	1		GPE
fuelectenerg-198	103	2		GPE
fuelectenerg-198	104	1		NORP
fuelectenerg-198	104	2		GPE
fuelectenerg-198	104	3		GPE
fuelectenerg-198	104	4	2 3	DATE
fuelectenerg-198	104	5	3 2	CARDINAL
fuelectenerg-198	104	6	2	CARDINAL
fuelectenerg-198	104	7	j   	PERSON
fuelectenerg-198	104	8	2	CARDINAL
fuelectenerg-198	105	1	  	PERSON
fuelectenerg-198	105	2		NORP
fuelectenerg-198	105	3		GPE
fuelectenerg-198	105	4	3 2	CARDINAL
fuelectenerg-198	105	5	2	CARDINAL
fuelectenerg-198	105	6	j  	WORK_OF_ART
fuelectenerg-198	105	7	3	CARDINAL
fuelectenerg-198	105	8		PERSON
fuelectenerg-198	106	1	de de j	ORG
fuelectenerg-198	106	2	 	PERSON
fuelectenerg-198	107	1	4	CARDINAL
fuelectenerg-198	108	1	5	CARDINAL
fuelectenerg-198	108	2	265	CARDINAL
fuelectenerg-198	108	3	3 pf	CARDINAL
fuelectenerg-198	108	4	rkt k 	PERSON
fuelectenerg-198	109	1		GPE
fuelectenerg-198	109	2		GPE
fuelectenerg-198	109	3	  	PERSON
fuelectenerg-198	109	4	6	CARDINAL
fuelectenerg-198	109	5	47	CARDINAL
fuelectenerg-198	109	6	0	NORP
fuelectenerg-198	109	7	kt	ORG
fuelectenerg-198	110	1	hkhkhk edv	PERSON
fuelectenerg-198	110	2	7	CARDINAL
fuelectenerg-198	111	1	two	CARDINAL
fuelectenerg-198	111	2	kirchhoff	ORG
fuelectenerg-198	111	3	ifpf jjj 	PERSON
fuelectenerg-198	112	1	9	CARDINAL
fuelectenerg-198	116	1	first	ORDINAL
fuelectenerg-198	117	1	2 to 3	CARDINAL
fuelectenerg-198	120	1	48	CARDINAL
fuelectenerg-198	121	1	al-ta2o5	PERSON
fuelectenerg-198	121	2	sio2	ORG
fuelectenerg-198	121	3	0.61	CARDINAL
fuelectenerg-198	122	1	49	CARDINAL
fuelectenerg-198	122	2	sio2	GPE
fuelectenerg-198	122	3	0.51	CARDINAL
fuelectenerg-198	122	4	kt = n 2	PERSON
fuelectenerg-198	122	5	2.1 2	CARDINAL
fuelectenerg-198	122	6	4.4	CARDINAL
fuelectenerg-198	122	7	sio2	PERSON
fuelectenerg-198	122	8	4.70	CARDINAL
fuelectenerg-198	123	1	49	CARDINAL
fuelectenerg-198	123	2	sio2	ORG
fuelectenerg-198	123	3	3.15	CARDINAL
fuelectenerg-198	124	1	50	CARDINAL
fuelectenerg-198	124	2	1	CARDINAL
fuelectenerg-198	125	1	266	CARDINAL
fuelectenerg-198	125	2		NORP
fuelectenerg-198	126	1	10	CARDINAL
fuelectenerg-198	126	2	vfb	ORG
fuelectenerg-198	127	1	sio2	ORG
fuelectenerg-198	130	1		PERSON
fuelectenerg-198	130	2		NORP
fuelectenerg-198	130	3		GPE
fuelectenerg-198	130	4		GPE
fuelectenerg-198	130	5		GPE
fuelectenerg-198	131	1		ORG
fuelectenerg-198	133	1		GPE
fuelectenerg-198	133	2		GPE
fuelectenerg-198	134	1		ORG
fuelectenerg-198	134	2		PERSON
fuelectenerg-198	134	3		NORP
fuelectenerg-198	134	4		GPE
fuelectenerg-198	135	1		GPE
fuelectenerg-198	135	2		GPE
fuelectenerg-198	136	1		ORG
fuelectenerg-198	138	1		GPE
fuelectenerg-198	138	2		GPE
fuelectenerg-198	139	1		ORG
fuelectenerg-198	139	2	si typen11 2	PERSON
fuelectenerg-198	139	3	2	CARDINAL
fuelectenerg-198	139	4	2	CARDINAL
fuelectenerg-198	140	1	0	CARDINAL
fuelectenerg-198	140	2	2	CARDINAL
fuelectenerg-198	140	3	nktn	ORG
fuelectenerg-198	140	4	kt	PRODUCT
fuelectenerg-198	140	5	e ktp e kt	PERSON
fuelectenerg-198	140	6	kt	PERSON
fuelectenerg-198	140	7	kt	PERSON
fuelectenerg-198	140	8	kt	PERSON
fuelectenerg-198	140	9		GPE
fuelectenerg-198	140	10		GPE
fuelectenerg-198	140	11		GPE
fuelectenerg-198	140	12		GPE
fuelectenerg-198	141	1	11	CARDINAL
fuelectenerg-198	141	2	if	GPE
fuelectenerg-198	141	3	n0	GPE
fuelectenerg-198	142	1	1 ma/cm	QUANTITY
fuelectenerg-198	145	1	p-n	PRODUCT
fuelectenerg-198	145	2	10	CARDINAL
fuelectenerg-198	145	3	2.3	CARDINAL
fuelectenerg-198	146	1	51	CARDINAL
fuelectenerg-198	147	1	5	CARDINAL
fuelectenerg-198	150	1	267	CARDINAL
fuelectenerg-198	151	1	5	CARDINAL
fuelectenerg-198	152	1	5	CARDINAL
fuelectenerg-198	152	2	cif	ORG
fuelectenerg-198	154	1	12	CARDINAL
fuelectenerg-198	154	2	13	CARDINAL
fuelectenerg-198	154	3	hk	PERSON
fuelectenerg-198	155	1	rit	ORG
fuelectenerg-198	155	2	cif	ORG
fuelectenerg-198	155	3	cit	ORG
fuelectenerg-198	157	1	3	CARDINAL
fuelectenerg-198	157	2	3.1	CARDINAL
fuelectenerg-198	158	1	first	ORDINAL
fuelectenerg-198	159	1	sio2	PERSON
fuelectenerg-198	160	1	3.15	CARDINAL
fuelectenerg-198	160	2	4.70 ev	PERCENT
fuelectenerg-198	160	3	44	CARDINAL
fuelectenerg-198	161	1	44	CARDINAL
fuelectenerg-198	161	2	2.8	CARDINAL
fuelectenerg-198	161	3	2.6	CARDINAL
fuelectenerg-198	162	1	2	CARDINAL
fuelectenerg-198	163	1	cif	ORG
fuelectenerg-198	163	2	268	CARDINAL
fuelectenerg-198	164	1	2	CARDINAL
fuelectenerg-198	165	1	493	CARDINAL
fuelectenerg-198	165	2	data)	PRODUCT
fuelectenerg-198	166	1	2.90	CARDINAL
fuelectenerg-198	166	2	893	CARDINAL
fuelectenerg-198	166	3	3.05	CARDINAL
fuelectenerg-198	166	4	1193	CARDINAL
fuelectenerg-198	166	5	2.97	CARDINAL
fuelectenerg-198	166	6	873 k	QUANTITY
fuelectenerg-198	167	1	44] gate	QUANTITY
fuelectenerg-198	167	2	2.72	CARDINAL
fuelectenerg-198	167	3	8.110-	DATE
fuelectenerg-198	167	4	2.80	CARDINAL
fuelectenerg-198	167	5	1.710-13	DATE
fuelectenerg-198	167	6	493 k	QUANTITY
fuelectenerg-198	168	1	52] ton	QUANTITY
fuelectenerg-198	168	2	973 2.65	CARDINAL
fuelectenerg-198	168	3	2.92	CARDINAL
fuelectenerg-198	168	4	3.35	CARDINAL
fuelectenerg-198	168	5	410-15 3.310-8	TIME
fuelectenerg-198	168	6	3.50	CARDINAL
fuelectenerg-198	168	7	17.2 2.80	CARDINAL
fuelectenerg-198	168	8	3.50	CARDINAL
fuelectenerg-198	168	9	310-15 3.310-8	TIME
fuelectenerg-198	168	10	493 k	QUANTITY
fuelectenerg-198	169	1	52] ton	QUANTITY
fuelectenerg-198	169	2	973 2.70	CARDINAL
fuelectenerg-198	169	3	3.30	CARDINAL
fuelectenerg-198	169	4	17.2 2.85	CARDINAL
fuelectenerg-198	169	5	3.25	CARDINAL
fuelectenerg-198	169	6	873 k	QUANTITY
fuelectenerg-198	170	1	2.04	CARDINAL
fuelectenerg-198	170	2	4.7 210-	CARDINAL
fuelectenerg-198	170	3	2.05	CARDINAL
fuelectenerg-198	170	4	4.7 510-16 810	CARDINAL
fuelectenerg-198	170	5	2.56	CARDINAL
fuelectenerg-198	170	6	16 210	CARDINAL
fuelectenerg-198	170	7	2.10	CARDINAL
fuelectenerg-198	170	8	5.90 2.6 4.2 1.210-12 110-11 first	QUANTITY
fuelectenerg-198	170	9	493 k	QUANTITY
fuelectenerg-198	173	1	second	ORDINAL
fuelectenerg-198	173	2	873 k	QUANTITY
fuelectenerg-198	173	3	sio2	PERSON
fuelectenerg-198	173	4	sio2	PERSON
fuelectenerg-198	174	1	about two	CARDINAL
fuelectenerg-198	174	2	w	GPE
fuelectenerg-198	175	1	as thick as 50	CARDINAL
fuelectenerg-198	175	2	44	CARDINAL
fuelectenerg-198	175	3	269	CARDINAL
fuelectenerg-198	175	4	10	CARDINAL
fuelectenerg-198	176	1	53	CARDINAL
fuelectenerg-198	177	1	as thick as 50	CARDINAL
fuelectenerg-198	177	2	44	CARDINAL
fuelectenerg-198	177	3	al gate	FAC
fuelectenerg-198	178	1	53	CARDINAL
fuelectenerg-198	180	1	third	ORDINAL
fuelectenerg-198	181	1	52	CARDINAL
fuelectenerg-198	185	1	31],[52],[62	CARDINAL
fuelectenerg-198	186	1	one	CARDINAL
fuelectenerg-198	187	1	2	CARDINAL
fuelectenerg-198	188	1	54	CARDINAL
fuelectenerg-198	188	2	hfo2	NORP
fuelectenerg-198	188	3	55	CARDINAL
fuelectenerg-198	190	1	56	CARDINAL
fuelectenerg-198	191	1	3.2	CARDINAL
fuelectenerg-198	193	1	51	CARDINAL
fuelectenerg-198	196	1	57],[58	CARDINAL
fuelectenerg-198	198	1	5	CARDINAL
fuelectenerg-198	199	1	57	CARDINAL
fuelectenerg-198	200	1	2 hk hk	DATE
fuelectenerg-198	200	2	2 2 hk hk	DATE
fuelectenerg-198	200	3	1 (	CARDINAL
fuelectenerg-198	200	4	2	CARDINAL
fuelectenerg-198	200	5	1	CARDINAL
fuelectenerg-198	200	6	2	CARDINAL
fuelectenerg-198	200	7	2	CARDINAL
fuelectenerg-198	200	8	1 1	CARDINAL
fuelectenerg-198	200	9	2	CARDINAL
fuelectenerg-198	200	10	fc	NORP
fuelectenerg-198	200	11	fc	NORP
fuelectenerg-198	201	1	fc	NORP
fuelectenerg-198	202	1		GPE
fuelectenerg-198	202	2	14	CARDINAL
fuelectenerg-198	204	1	270	CARDINAL
fuelectenerg-198	204	2	2 2 hk hk	DATE
fuelectenerg-198	204	3	1 1	DATE
fuelectenerg-198	204	4	1 1	CARDINAL
fuelectenerg-198	204	5	1 1	CARDINAL
fuelectenerg-198	206	1	fc	NORP
fuelectenerg-198	206	2		NORP
fuelectenerg-198	206	3	    	ORG
fuelectenerg-198	206	4	15	CARDINAL
fuelectenerg-198	207	1	1	CARDINAL
fuelectenerg-198	207	2	1	CARDINAL
fuelectenerg-198	208	1	fc	NORP
fuelectenerg-198	208	2	fc	NORP
fuelectenerg-198	209	1	16	CARDINAL
fuelectenerg-198	209	2	57	CARDINAL
fuelectenerg-198	209	3	15	CARDINAL
fuelectenerg-198	209	4	16	CARDINAL
fuelectenerg-198	210	1	51	CARDINAL
fuelectenerg-198	212	1	3.3	CARDINAL
fuelectenerg-198	214	1	sio2	PERSON
fuelectenerg-198	214	2	59	CARDINAL
fuelectenerg-198	217	1	4.	CARDINAL
fuelectenerg-198	220	1	hfo2	ORG
fuelectenerg-198	221	1	al	ORG
fuelectenerg-198	224	1	macedonian ministry of education	ORG
fuelectenerg-198	224	2	13	CARDINAL
fuelectenerg-198	225	1	271	CARDINAL
fuelectenerg-198	225	2	1	CARDINAL
fuelectenerg-198	225	3	j. zhang	PERSON
fuelectenerg-198	225	4	z. li	PERSON
fuelectenerg-198	225	5	h. zhou	PERSON
fuelectenerg-198	225	6	h. wang	PERSON
fuelectenerg-198	226	1	2	CARDINAL
fuelectenerg-198	226	2	c. zhan	PERSON
fuelectenerg-198	226	3	j. zhang	PERSON
fuelectenerg-198	226	4	h. wang	PERSON
fuelectenerg-198	226	5	t. deng	PERSON
fuelectenerg-198	226	6	s. tang	PERSON
fuelectenerg-198	226	7	54, 2014	DATE
fuelectenerg-198	227	1	388–392	CARDINAL
fuelectenerg-198	228	1	3	CARDINAL
fuelectenerg-198	228	2	s. chen	PERSON
fuelectenerg-198	228	3	liu	PERSON
fuelectenerg-198	228	4	l. feng	PERSON
fuelectenerg-198	228	5	x. che	PERSON
fuelectenerg-198	228	6	x. zhao	PERSON
fuelectenerg-198	228	7	hfo2	ORG
fuelectenerg-198	230	1	lett	PERSON
fuelectenerg-198	231	1	103 2013	DATE
fuelectenerg-198	232	1	132902	DATE
fuelectenerg-198	232	2	4	CARDINAL
fuelectenerg-198	233	1	4	CARDINAL
fuelectenerg-198	233	2	g.lee	PERSON
fuelectenerg-198	234	1	lai	ORG
fuelectenerg-198	234	2	c. phatak	PERSON
fuelectenerg-198	234	3	r. s. katiyar	PERSON
fuelectenerg-198	234	4	o. auciello	PERSON
fuelectenerg-198	234	5	j. appl	PERSON
fuelectenerg-198	236	1	114	CARDINAL
fuelectenerg-198	236	2	2013	DATE
fuelectenerg-198	237	1	027001	DATE
fuelectenerg-198	237	2	5	CARDINAL
fuelectenerg-198	238	1	5	CARDINAL
fuelectenerg-198	238	2	m. ali khaskheli	PERSON
fuelectenerg-198	238	3	p. wu	PERSON
fuelectenerg-198	238	4	r. chand	PERSON
fuelectenerg-198	238	5	x. li	PERSON
fuelectenerg-198	238	6	h. wang	PERSON
fuelectenerg-198	238	7	zhang	PERSON
fuelectenerg-198	238	8	s. chen	PERSON
fuelectenerg-198	238	9	yili pei	PERSON
fuelectenerg-198	238	10	hfo2	NORP
fuelectenerg-198	238	11	266, 2013	DATE
fuelectenerg-198	239	1	355–359	CARDINAL
fuelectenerg-198	239	2	6	CARDINAL
fuelectenerg-198	239	3	b. toomey	PERSON
fuelectenerg-198	239	4	k. cherkaoui	PERSON
fuelectenerg-198	239	5	s. monaghan	PERSON
fuelectenerg-198	239	6	é	GPE
fuelectenerg-198	239	7	d. o’connell	PERSON
fuelectenerg-198	239	8	l. oberbeck	PERSON
fuelectenerg-198	239	9	e. tois	PERSON
fuelectenerg-198	239	10	t. blomberg	GPE
fuelectenerg-198	239	11	s.b. newcomb	PERSON
fuelectenerg-198	239	12	p.k. hurley	PERSON
fuelectenerg-198	239	13	mim	PERSON
fuelectenerg-198	239	14	94	CARDINAL
fuelectenerg-198	239	15	2012	DATE
fuelectenerg-198	241	1	7	CARDINAL
fuelectenerg-198	241	2	z. essa	PERSON
fuelectenerg-198	241	3	c. gaumer	PERSON
fuelectenerg-198	241	4	a. pakfar	PERSON
fuelectenerg-198	241	5	m. gros-jean	PERSON
fuelectenerg-198	241	6	m. juhel	PERSON
fuelectenerg-198	241	7	f. panciera	PERSON
fuelectenerg-198	241	8	c. tavernier	PERSON
fuelectenerg-198	241	9	f. cristiano	PERSON
fuelectenerg-198	243	1	lett	PERSON
fuelectenerg-198	244	1	101 2012	DATE
fuelectenerg-198	245	1	182901	DATE
fuelectenerg-198	245	2	5	CARDINAL
fuelectenerg-198	246	1	8	CARDINAL
fuelectenerg-198	246	2	s. a. mollinger	PERSON
fuelectenerg-198	246	3	a. t. iancu	PERSON
fuelectenerg-198	246	4	r. m. reis	PERSON
fuelectenerg-198	246	5	f. b. prinz	PERSON
fuelectenerg-198	248	1	lett	PERSON
fuelectenerg-198	249	1	101 2012	DATE
fuelectenerg-198	250	1	033905	DATE
fuelectenerg-198	250	2	4	CARDINAL
fuelectenerg-198	251	1	9	CARDINAL
fuelectenerg-198	251	2	sun	PERSON
fuelectenerg-198	252	1	l. chen	PERSON
fuelectenerg-198	252	2	p. zhou	PERSON
fuelectenerg-198	252	3	s.-j	PERSON
fuelectenerg-198	253	1	ding	PERSON
fuelectenerg-198	253	2	12, 2012	DATE
fuelectenerg-198	254	1	1445–1447	CARDINAL
fuelectenerg-198	255	1	10	CARDINAL
fuelectenerg-198	255	2	c. jin	PERSON
fuelectenerg-198	255	3	x. yang	PERSON
fuelectenerg-198	255	4	y. dong	PERSON
fuelectenerg-198	255	5	h. zhang	PERSON
fuelectenerg-198	255	6	l. zhuge	PERSON
fuelectenerg-198	255	7	x. wu	PERSON
fuelectenerg-198	255	8	z. wu	PERSON
fuelectenerg-198	255	9	258, 2012	DATE
fuelectenerg-198	256	1	2958	CARDINAL
fuelectenerg-198	257	1	11	CARDINAL
fuelectenerg-198	257	2	x. zhang	PERSON
fuelectenerg-198	257	3	h. tu	PERSON
fuelectenerg-198	257	4	y. guo	PERSON
fuelectenerg-198	257	5	h. zhao	PERSON
fuelectenerg-198	257	6	m. yang	PERSON
fuelectenerg-198	257	7	f. wei	PERSON
fuelectenerg-198	257	8	y. xiong	PERSON
fuelectenerg-198	257	9	z. yang	PERSON
fuelectenerg-198	257	10	j. du	PERSON
fuelectenerg-198	257	11	w. wang	PERSON
fuelectenerg-198	257	12	ge	ORG
fuelectenerg-198	257	13	j. appl	PERSON
fuelectenerg-198	259	1	111	CARDINAL
fuelectenerg-198	259	2	2012	DATE
fuelectenerg-198	259	3	014102	CARDINAL
fuelectenerg-198	260	1	4	CARDINAL
fuelectenerg-198	261	1	12	CARDINAL
fuelectenerg-198	261	2	f. yang	PERSON
fuelectenerg-198	261	3	c. duan	PERSON
fuelectenerg-198	261	4	y. zhang	PERSON
fuelectenerg-198	261	5	jun liang	PERSON
fuelectenerg-198	261	6	z. cui	PERSON
fuelectenerg-198	261	7	4f→5d	CARDINAL
fuelectenerg-198	261	8	first	ORDINAL
fuelectenerg-198	261	9	j. phys	ORG
fuelectenerg-198	262	1	condens	PERSON
fuelectenerg-198	263	1	24, 2012	DATE
fuelectenerg-198	264	1	055502	DATE
fuelectenerg-198	264	2	10	CARDINAL
fuelectenerg-198	265	1	13	CARDINAL
fuelectenerg-198	265	2	b. meyler	PERSON
fuelectenerg-198	265	3	c. cytermann	PERSON
fuelectenerg-198	265	4	s. yofis	PERSON
fuelectenerg-198	265	5	j. salzman	PERSON
fuelectenerg-198	265	6	m. eizenberg	PERSON
fuelectenerg-198	265	7	hfo2	ORG
fuelectenerg-198	265	8	si metal	ORG
fuelectenerg-198	267	1	lett	PERSON
fuelectenerg-198	268	1	100, 2012	DATE
fuelectenerg-198	268	2	062907	DATE
fuelectenerg-198	269	1	3	CARDINAL
fuelectenerg-198	270	1	14	CARDINAL
fuelectenerg-198	271	1	salam	PERSON
fuelectenerg-198	271	2	h. fukuda	PERSON
fuelectenerg-198	271	3	s. nomera	PERSON
fuelectenerg-198	271	4	j. appl	PERSON
fuelectenerg-198	273	1	93, 2003	DATE
fuelectenerg-198	274	1	1169–1175	CARDINAL
fuelectenerg-198	275	1	15	CARDINAL
fuelectenerg-198	275	2	e. atanassova	PERSON
fuelectenerg-198	275	3	n. novkovski	PERSON
fuelectenerg-198	275	4	d. spassov	GPE
fuelectenerg-198	275	5	a. paskaleva	PERSON
fuelectenerg-198	275	6	a. skeparovski	PERSON
fuelectenerg-198	275	7	sio2	PERSON
fuelectenerg-198	275	8	microelectron	ORG
fuelectenerg-198	275	9	reliab	PERSON
fuelectenerg-198	276	1	54, 2014	DATE
fuelectenerg-198	278	1	16	CARDINAL
fuelectenerg-198	278	2	e. atanassova	PERSON
fuelectenerg-198	278	3	n. stojadinovic	PERSON
fuelectenerg-198	278	4	d. spassov	PERSON
fuelectenerg-198	278	5	i. manic	PERSON
fuelectenerg-198	278	6	a. paskaleva	PERSON
fuelectenerg-198	278	7	semicond	PERSON
fuelectenerg-198	279	1	sci	ORG
fuelectenerg-198	279	2	technol	PERSON
fuelectenerg-198	279	3	28, 2013	DATE
fuelectenerg-198	279	4	055006-9	DATE
fuelectenerg-198	279	5	17	CARDINAL
fuelectenerg-198	279	6	e. atanassova	PERSON
fuelectenerg-198	279	7	d. spassov	GPE
fuelectenerg-198	279	8	a. paskaleva	PERSON
fuelectenerg-198	279	9	15, 2012	DATE
fuelectenerg-198	280	1	98–107	CARDINAL
fuelectenerg-198	281	1	18	CARDINAL
fuelectenerg-198	281	2	a. paskaleva	PERSON
fuelectenerg-198	281	3	e. atanassova	PERSON
fuelectenerg-198	282	1	sci	ORG
fuelectenerg-198	282	2	258, 2012	DATE
fuelectenerg-198	282	3	4507–4512	CARDINAL
fuelectenerg-198	283	1	19	CARDINAL
fuelectenerg-198	283	2	e. atanassova	PERSON
fuelectenerg-198	283	3	a. paskaleva	PERSON
fuelectenerg-198	283	4	d. spassov	PERSON
fuelectenerg-198	283	5	hfo2	ORG
fuelectenerg-198	283	6	microelectron	ORG
fuelectenerg-198	284	1	reliab	PERSON
fuelectenerg-198	285	1	52, 2011	DATE
fuelectenerg-198	286	1	642–650	CARDINAL
fuelectenerg-198	287	1	20	CARDINAL
fuelectenerg-198	287	2	a. paskaleva	PERSON
fuelectenerg-198	287	3	m. ťapajna	PERSON
fuelectenerg-198	287	4	e. dobročka	PERSON
fuelectenerg-198	287	5	k. hušeková	PERSON
fuelectenerg-198	287	6	e. atanassova	PERSON
fuelectenerg-198	287	7	k. fröhlich	PERSON
fuelectenerg-198	289	1	sci	ORG
fuelectenerg-198	289	2	257, 2011	DATE
fuelectenerg-198	291	1	21	CARDINAL
fuelectenerg-198	291	2	a. skeparovski	PERSON
fuelectenerg-198	291	3	n. novkovski	PERSON
fuelectenerg-198	291	4	e. atanassova	PERSON
fuelectenerg-198	291	5	a. paskaleva	PERSON
fuelectenerg-198	291	6	v. k. lazarov	PERSON
fuelectenerg-198	291	7	j. phys	PERSON
fuelectenerg-198	294	1	44, 2011	DATE
fuelectenerg-198	295	1	235103–235103-10	CARDINAL
fuelectenerg-198	296	1	22	CARDINAL
fuelectenerg-198	296	2	i. manić	PERSON
fuelectenerg-198	296	3	e. atanassova	PERSON
fuelectenerg-198	296	4	d. spassov	GPE
fuelectenerg-198	296	5	a. paskaleva	PERSON
fuelectenerg-198	296	6	microelectron	ORG
fuelectenerg-198	297	1	eng	PERSON
fuelectenerg-198	297	2	88, 2011	DATE
fuelectenerg-198	298	1	305–313	CARDINAL
fuelectenerg-198	299	1	23	CARDINAL
fuelectenerg-198	299	2	e. atanassova	PERSON
fuelectenerg-198	299	3	a. paskaleva	PERSON
fuelectenerg-198	299	4	microelectron	ORG
fuelectenerg-198	300	1	reliab	PERSON
fuelectenerg-198	301	1	51, 2011	DATE
fuelectenerg-198	302	1	2102–2109	CARDINAL
fuelectenerg-198	303	1	272	CARDINAL
fuelectenerg-198	303	2	24	CARDINAL
fuelectenerg-198	303	3	e. atanassova	PERSON
fuelectenerg-198	303	4	519, 2011	DATE
fuelectenerg-198	305	1	25	CARDINAL
fuelectenerg-198	305	2	e. atanassova	PERSON
fuelectenerg-198	305	3	n. novkovski	PERSON
fuelectenerg-198	305	4	a. paskaleva	PERSON
fuelectenerg-198	305	5	d. spassov	PERSON
fuelectenerg-198	305	6	hfo2	ORG
fuelectenerg-198	305	7	microelectron	ORG
fuelectenerg-198	305	8	reliab	PERSON
fuelectenerg-198	306	1	50, 2010	DATE
fuelectenerg-198	307	1	794–800	CARDINAL
fuelectenerg-198	308	1	26	CARDINAL
fuelectenerg-198	308	2	a. paskaleva	PERSON
fuelectenerg-198	308	3	e. atanassova	PERSON
fuelectenerg-198	308	4	sci	ORG
fuelectenerg-198	309	1	semicond	PERSON
fuelectenerg-198	311	1	13, 2010	DATE
fuelectenerg-198	312	1	349–355	CARDINAL
fuelectenerg-198	313	1	27	CARDINAL
fuelectenerg-198	313	2	e. atanassova	PERSON
fuelectenerg-198	313	3	m. georgieva	PERSON
fuelectenerg-198	313	4	d. spassov	PERSON
fuelectenerg-198	313	5	a. paskaleva	PERSON
fuelectenerg-198	313	6	microelectron	ORG
fuelectenerg-198	314	1	eng	PERSON
fuelectenerg-198	314	2	87, 2010	DATE
fuelectenerg-198	316	1	28	CARDINAL
fuelectenerg-198	316	2	e. atanassova	PERSON
fuelectenerg-198	316	3	nh3	CARDINAL
fuelectenerg-198	316	4	semicond	PERSON
fuelectenerg-198	317	1	sci	ORG
fuelectenerg-198	317	2	technol	PERSON
fuelectenerg-198	317	3	24, 2009	DATE
fuelectenerg-198	318	1	075024–075024-10	DATE
fuelectenerg-198	319	1	29	CARDINAL
fuelectenerg-198	319	2	a. skeparovski	PERSON
fuelectenerg-198	319	3	n. novkovski	PERSON
fuelectenerg-198	319	4	e. atanassova	PERSON
fuelectenerg-198	319	5	d. spassov	GPE
fuelectenerg-198	319	6	a. paskaleva	PERSON
fuelectenerg-198	319	7	j. phys	PERSON
fuelectenerg-198	322	1	42, 2009	DATE
fuelectenerg-198	322	2	095302–095302	CARDINAL
fuelectenerg-198	323	1	30	CARDINAL
fuelectenerg-198	323	2	a. paskaleva	PERSON
fuelectenerg-198	323	3	e. atanassova	PERSON
fuelectenerg-198	323	4	j. phys	ORG
fuelectenerg-198	326	1	42, 2009	DATE
fuelectenerg-198	327	1	025105–025105-8	CARDINAL
fuelectenerg-198	328	1	31	CARDINAL
fuelectenerg-198	328	2	n2o	GPE
fuelectenerg-198	328	3	517	CARDINAL
fuelectenerg-198	328	4	2009	DATE
fuelectenerg-198	328	5	4394–4401	DATE
fuelectenerg-198	329	1	32	CARDINAL
fuelectenerg-198	329	2	e. atanassova	PERSON
fuelectenerg-198	330	1	83, 2006	DATE
fuelectenerg-198	331	1	435–445	CARDINAL
fuelectenerg-198	332	1	33	CARDINAL
fuelectenerg-198	332	2	e. rosenbaum	PERSON
fuelectenerg-198	332	3	l. f. register	PERSON
fuelectenerg-198	332	4	44, 1997	DATE
fuelectenerg-198	333	1	317–323	CARDINAL
fuelectenerg-198	334	1	34	CARDINAL
fuelectenerg-198	334	2	m. houssa	PERSON
fuelectenerg-198	334	3	m. tuominen	PERSON
fuelectenerg-198	334	4	m. naili	PERSON
fuelectenerg-198	334	5	a. stesmans	PERSON
fuelectenerg-198	334	6	s. haukka	PERSON
fuelectenerg-198	334	7	m. m. heyns	PERSON
fuelectenerg-198	334	8	j. appl	PERSON
fuelectenerg-198	336	1	87, 2000	DATE
fuelectenerg-198	338	1	35	CARDINAL
fuelectenerg-198	338	2	w. s. lau	PERSON
fuelectenerg-198	338	3	l. zhong	PERSON
fuelectenerg-198	338	4	allen lee	PERSON
fuelectenerg-198	338	5	c. h.	PERSON
fuelectenerg-198	338	6	taejoon	PERSON
fuelectenerg-198	338	7	n. p. sandler	PERSON
fuelectenerg-198	338	8	t. c. chong	PERSON
fuelectenerg-198	338	9	zero	CARDINAL
fuelectenerg-198	340	1	lett	PERSON
fuelectenerg-198	341	1	71, 1997	DATE
fuelectenerg-198	342	1	500–502	CARDINAL
fuelectenerg-198	343	1	36	CARDINAL
fuelectenerg-198	343	2	w. s. lau	PERSON
fuelectenerg-198	343	3	l. l. leong	PERSON
fuelectenerg-198	343	4	han	NORP
fuelectenerg-198	343	5	n. p. sandler	PERSON
fuelectenerg-198	343	6	zero	CARDINAL
fuelectenerg-198	345	1	lett	PERSON
fuelectenerg-198	345	2	83, 2003	DATE
fuelectenerg-198	346	1	2835–2837	CARDINAL
fuelectenerg-198	347	1	37	CARDINAL
fuelectenerg-198	347	2	a. skeparovski	PERSON
fuelectenerg-198	347	3	e. atanassova	PERSON
fuelectenerg-198	347	4	j. phys	PERSON
fuelectenerg-198	350	1	41, 2008	DATE
fuelectenerg-198	351	1	105302–105302	CARDINAL
fuelectenerg-198	352	1	38	CARDINAL
fuelectenerg-198	352	2	l. stojanovska-georgievska	PERSON
fuelectenerg-198	352	3	n. novkovski	PERSON
fuelectenerg-198	352	4	e. atanassova	PERSON
fuelectenerg-198	352	5	406	CARDINAL
fuelectenerg-198	353	1	3348-3353	CARDINAL
fuelectenerg-198	353	2	2011	DATE
fuelectenerg-198	354	1	39	CARDINAL
fuelectenerg-198	354	2	l.s. georgievska	GPE
fuelectenerg-198	354	3	n. novkovski	PERSON
fuelectenerg-198	354	4	e. atanassova	PERSON
fuelectenerg-198	354	5	mo	GPE
fuelectenerg-198	354	6	2012 28th	DATE
fuelectenerg-198	354	7	miel2012	GPE
fuelectenerg-198	355	1	331-334	QUANTITY
fuelectenerg-198	355	2	40	CARDINAL
fuelectenerg-198	356	1	chiu	PERSON
fuelectenerg-198	356	2	j.-j	GPE
fuelectenerg-198	357	1	wang	PERSON
fuelectenerg-198	357	2	j. y. lee	PERSON
fuelectenerg-198	357	3	s. c. wu	PERSON
fuelectenerg-198	357	4	j. appl	PERSON
fuelectenerg-198	359	1	81, 1997	DATE
fuelectenerg-198	360	1	6911-6915	DATE
fuelectenerg-198	361	1	41	CARDINAL
fuelectenerg-198	361	2	h. reisinger	PERSON
fuelectenerg-198	361	3	r. stengl	PERSON
fuelectenerg-198	361	4	m. gutsche	PERSON
fuelectenerg-198	361	5	f. wiest	PERSON
fuelectenerg-198	361	6	v. capodieci	PERSON
fuelectenerg-198	361	7	j. schulze	PERSON
fuelectenerg-198	361	8	i.	PERSON
fuelectenerg-198	361	9	j. appl	PERSON
fuelectenerg-198	363	1	97, 2005	DATE
fuelectenerg-198	364	1	044107-7	DATE
fuelectenerg-198	365	1	42	CARDINAL
fuelectenerg-198	365	2	e. atanassova	PERSON
fuelectenerg-198	365	3	d. spassov	GPE
fuelectenerg-198	365	4	a. paskaleva	PERSON
fuelectenerg-198	365	5	j. koprinarova	PERSON
fuelectenerg-198	365	6	m. gueorguieva	PERSON
fuelectenerg-198	366	1	j. 33, 2002	ORG
fuelectenerg-198	367	1	907–920	CARDINAL
fuelectenerg-198	368	1	43	CARDINAL
fuelectenerg-198	368	2	m. lenzlinger	PERSON
fuelectenerg-198	368	3	e. h.	PERSON
fuelectenerg-198	368	4	sio2	ORG
fuelectenerg-198	368	5	j. appl	PERSON
fuelectenerg-198	370	1	40, 1969	DATE
fuelectenerg-198	371	1	278	CARDINAL
fuelectenerg-198	372	1	44	CARDINAL
fuelectenerg-198	372	2	e. atanassova	PERSON
fuelectenerg-198	374	1	lett	PERSON
fuelectenerg-198	374	2	85, 2004	DATE
fuelectenerg-198	375	1	3142-3144	CARDINAL
fuelectenerg-198	376	1	45	CARDINAL
fuelectenerg-198	376	2	j. l. autran	PERSON
fuelectenerg-198	376	3	devine	PERSON
fuelectenerg-198	376	4	j. appl	PERSON
fuelectenerg-198	378	1	86, 1999	DATE
fuelectenerg-198	380	1	46	CARDINAL
fuelectenerg-198	380	2	d. j. dimaria	PERSON
fuelectenerg-198	380	3	sio2	PERSON
fuelectenerg-198	381	1	31, 1988	DATE
fuelectenerg-198	382	1	629–636	CARDINAL
fuelectenerg-198	383	1	47	CARDINAL
fuelectenerg-198	383	2	j. r. yeargan	PERSON
fuelectenerg-198	383	3	h. l. taylor	PERSON
fuelectenerg-198	383	4	j. appl	PERSON
fuelectenerg-198	385	1	39, 1968	DATE
fuelectenerg-198	387	1	48	CARDINAL
fuelectenerg-198	387	2	398	CARDINAL
fuelectenerg-198	387	3	2007	DATE
fuelectenerg-198	389	1	273	CARDINAL
fuelectenerg-198	389	2	49	CARDINAL
fuelectenerg-198	389	3	k. n. yang	PERSON
fuelectenerg-198	389	4	h. t. huang	PERSON
fuelectenerg-198	389	5	m. c. chang	PERSON
fuelectenerg-198	389	6	c. m. chu	PERSON
fuelectenerg-198	389	7	y. s. chen	PERSON
fuelectenerg-198	389	8	m. j. chen	PERSON
fuelectenerg-198	389	9	y. m. lin	PERSON
fuelectenerg-198	389	10	m. c. yu	PERSON
fuelectenerg-198	389	11	s. m. yang	PERSON
fuelectenerg-198	389	12	d. c. h. yu	PERSON
fuelectenerg-198	389	13	m. s. liang	PERSON
fuelectenerg-198	391	1	47, 2000	DATE
fuelectenerg-198	392	1	2161-2166	CARDINAL
fuelectenerg-198	393	1	50	CARDINAL
fuelectenerg-198	393	2	n. yang	PERSON
fuelectenerg-198	393	3	w.k. henson	PERSON
fuelectenerg-198	393	4	j.r. hauser	PERSON
fuelectenerg-198	393	5	j. wortman	PERSON
fuelectenerg-198	393	6	46, 1999	DATE
fuelectenerg-198	393	7	1464-1471	CARDINAL
fuelectenerg-198	394	1	51	CARDINAL
fuelectenerg-198	394	2	d. k. shroder	PERSON
fuelectenerg-198	395	1	hobokeen	PRODUCT
fuelectenerg-198	395	2	new jersey	GPE
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fuelectenerg-198	395	4	2006	DATE
fuelectenerg-198	395	5	chapter 9	LAW
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fuelectenerg-198	397	1	52	CARDINAL
fuelectenerg-198	397	2	a. paskaleva	PERSON
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fuelectenerg-198	398	1	sci	ORG
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fuelectenerg-198	398	3	20, 2005	DATE
fuelectenerg-198	399	1	233–238	CARDINAL
fuelectenerg-198	400	1	53	CARDINAL
fuelectenerg-198	400	2	al	ORG
fuelectenerg-198	400	3	au)-ta2o5/sio2-si	ORG
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fuelectenerg-198	401	1	sci	ORG
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fuelectenerg-198	401	3	21, 2006	DATE
fuelectenerg-198	402	1	945–951	CARDINAL
fuelectenerg-198	403	1	54	CARDINAL
fuelectenerg-198	403	2	aleksandar skeparovski	ORG
fuelectenerg-198	403	3	nenad novkovski	PERSON
fuelectenerg-198	403	4	j. optoelectron	PERSON
fuelectenerg-198	404	1	9, 2007	DATE
fuelectenerg-198	406	1	55	CARDINAL
fuelectenerg-198	406	2	w. j. zhu	PERSON
fuelectenerg-198	407	1	j. kim	PERSON
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fuelectenerg-198	408	1	23, 2002	DATE
fuelectenerg-198	410	1	56	CARDINAL
fuelectenerg-198	410	2	s. huang	PERSON
fuelectenerg-198	411	1	60, 2013	DATE
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fuelectenerg-198	413	1	57	CARDINAL
fuelectenerg-198	413	2	e. atanassova	PERSON
fuelectenerg-198	413	3	semicond	PERSON
fuelectenerg-198	414	1	sci	ORG
fuelectenerg-198	414	2	technol	PERSON
fuelectenerg-198	415	1	22, 2007	DATE
fuelectenerg-198	416	1	533–536	CARDINAL
fuelectenerg-198	417	1	58	CARDINAL
fuelectenerg-198	417	2	e. atanassova	PERSON
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fuelectenerg-198	418	1	adv	ORG
fuelectenerg-198	419	1	mat.-symposia 1, 2009	DATE
fuelectenerg-198	420	1	398–403	CARDINAL
fuelectenerg-198	421	1	59	CARDINAL
fuelectenerg-198	421	2	e. atanassova	PERSON
fuelectenerg-198	423	1	lett	PERSON
fuelectenerg-198	424	1	86, 2005	DATE
fuelectenerg-198	425	1	1521041–52104-3	DATE
fuelectenerg-198	426	1	60	CARDINAL
fuelectenerg-198	426	2	e. atanassova	PERSON
fuelectenerg-198	426	3	a. paskaleva	PERSON
fuelectenerg-198	428	1	sci	ORG
fuelectenerg-198	428	2	253, 2007	DATE
fuelectenerg-198	429	1	4396–4403	CARDINAL
fuelectenerg-198	430	1	61	CARDINAL
fuelectenerg-198	430	2	e. atanassova	PERSON
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fuelectenerg-198	431	2	2	CARDINAL
fuelectenerg-198	432	1	533–536	CARDINAL
fuelectenerg-198	433	1	62	CARDINAL
fuelectenerg-198	433	2	e. atanassova	PERSON
fuelectenerg-198	433	3	n2o	GPE
fuelectenerg-198	435	1	81, 2005	DATE
fuelectenerg-198	436	1	1191–1195	CARDINAL