id	sid	eid	entity	type
fuelectenerg-3620	1	1	31	DATE
fuelectenerg-3620	1	2	no 3, september 2018	DATE
fuelectenerg-3620	2	1	343-366	CARDINAL
fuelectenerg-3620	2	2	saleh shaheen	PERSON
fuelectenerg-3620	2	3	gady golan	PERSON
fuelectenerg-3620	2	4	moshe azoulay	PERSON
fuelectenerg-3620	2	5	joseph bernstein	PERSON
fuelectenerg-3620	3	1	ariel university	ORG
fuelectenerg-3620	3	2	ariel	GPE
fuelectenerg-3620	3	3	israel	GPE
fuelectenerg-3620	4	1	the last few decades	DATE
fuelectenerg-3620	6	1	bti	ORG
fuelectenerg-3620	8	1	the past decade	DATE
fuelectenerg-3620	8	2	20	CARDINAL
fuelectenerg-3620	11	1	cmos finfet	ORG
fuelectenerg-3620	11	2	bti	ORG
fuelectenerg-3620	11	3	1	CARDINAL
fuelectenerg-3620	11	4	1.1	CARDINAL
fuelectenerg-3620	12	1	cmos finfet transistors	ORG
fuelectenerg-3620	12	2	three	CARDINAL
fuelectenerg-3620	15	1	2001	DATE
fuelectenerg-3620	15	2	the university of california	ORG
fuelectenerg-3620	16	1	1	CARDINAL
fuelectenerg-3620	17	1	3d	CARDINAL
fuelectenerg-3620	18	1	three	CARDINAL
fuelectenerg-3620	18	2	2	CARDINAL
fuelectenerg-3620	19	1	february 8, 2018	DATE
fuelectenerg-3620	19	2	gady golan	PERSON
fuelectenerg-3620	19	3	ariel university	ORG
fuelectenerg-3620	19	4	ariel 40700	PERSON
fuelectenerg-3620	19	5	israel	GPE
fuelectenerg-3620	19	6	https://en.wikipedia.org/wiki/wafer_(electronics	PERSON
fuelectenerg-3620	20	1	344	CARDINAL
fuelectenerg-3620	20	2	s. shaheen	PERSON
fuelectenerg-3620	20	3	g. golan	PERSON
fuelectenerg-3620	20	4	m. azoulay	PERSON
fuelectenerg-3620	20	5	j. bernstein	PERSON
fuelectenerg-3620	23	1	1.2	CARDINAL
fuelectenerg-3620	23	2	sub-micron	CARDINAL
fuelectenerg-3620	25	1	gordon moore	PERSON
fuelectenerg-3620	25	2	1965	DATE
fuelectenerg-3620	25	3	every two years	DATE
fuelectenerg-3620	25	4	four decades	DATE
fuelectenerg-3620	26	1	3	CARDINAL
fuelectenerg-3620	27	1	2018	DATE
fuelectenerg-3620	27	2	more than billion	CARDINAL
fuelectenerg-3620	27	3	one	CARDINAL
fuelectenerg-3620	29	1	1998	DATE
fuelectenerg-3620	29	2	4	CARDINAL
fuelectenerg-3620	29	3	10	CARDINAL
fuelectenerg-3620	29	4	5	CARDINAL
fuelectenerg-3620	30	1	6	CARDINAL
fuelectenerg-3620	31	1	8	CARDINAL
fuelectenerg-3620	31	2	―time	ORG
fuelectenerg-3620	32	1	9	CARDINAL
fuelectenerg-3620	33	1	10	CARDINAL
fuelectenerg-3620	34	1	11	CARDINAL
fuelectenerg-3620	37	1	up to 50%	PERCENT
fuelectenerg-3620	37	2	12	CARDINAL
fuelectenerg-3620	40	1	13	CARDINAL
fuelectenerg-3620	41	1	345	CARDINAL
fuelectenerg-3620	45	1	2	CARDINAL
fuelectenerg-3620	47	1	14	CARDINAL
fuelectenerg-3620	48	1	3	CARDINAL
fuelectenerg-3620	49	1	4	CARDINAL
fuelectenerg-3620	50	1	5	CARDINAL
fuelectenerg-3620	51	1	2	CARDINAL
fuelectenerg-3620	51	2	2.1	CARDINAL
fuelectenerg-3620	55	1	tens or hundreds of millions	CARDINAL
fuelectenerg-3620	57	1	today	DATE
fuelectenerg-3620	58	1	14	CARDINAL
fuelectenerg-3620	61	1	billion part hours	QUANTITY
fuelectenerg-3620	65	1	1	CARDINAL
fuelectenerg-3620	65	2	1	CARDINAL
fuelectenerg-3620	65	3	346	CARDINAL
fuelectenerg-3620	65	4	s. shaheen	PERSON
fuelectenerg-3620	65	5	g. golan	PERSON
fuelectenerg-3620	65	6	m. azoulay	PERSON
fuelectenerg-3620	65	7	j. bernstein	PERSON
fuelectenerg-3620	66	1	#	CARDINAL
fuelectenerg-3620	66	2	#	CARDINAL
fuelectenerg-3620	67	1	af	ORG
fuelectenerg-3620	68	1	mil-hdbk-217	DATE
fuelectenerg-3620	69	1	af	ORG
fuelectenerg-3620	71	1	today	DATE
fuelectenerg-3620	71	2	one	CARDINAL
fuelectenerg-3620	75	1	18	CARDINAL
fuelectenerg-3620	78	1	2.2	CARDINAL
fuelectenerg-3620	79	1	bti	ORG
fuelectenerg-3620	79	2	bti	ORG
fuelectenerg-3620	79	3	1966	DATE
fuelectenerg-3620	79	4	7	CARDINAL
fuelectenerg-3620	79	5	1977	DATE
fuelectenerg-3620	80	1	bti	ORG
fuelectenerg-3620	82	1	bti	ORG
fuelectenerg-3620	83	1	19	CARDINAL
fuelectenerg-3620	90	1	347	CARDINAL
fuelectenerg-3620	92	1	bti	ORG
fuelectenerg-3620	92	2	20	CARDINAL
fuelectenerg-3620	93	1	1	CARDINAL
fuelectenerg-3620	93	2	two	CARDINAL
fuelectenerg-3620	93	3	firstly	ORDINAL
fuelectenerg-3620	95	1	secondly	ORDINAL
fuelectenerg-3620	99	1	1	CARDINAL
fuelectenerg-3620	99	2	bti	ORG
fuelectenerg-3620	99	3	two	CARDINAL
fuelectenerg-3620	99	4	bti	ORG
fuelectenerg-3620	101	1	un	ORG
fuelectenerg-3620	101	2	50%	PERCENT
fuelectenerg-3620	102	1	bti	ORG
fuelectenerg-3620	104	1	22	CARDINAL
fuelectenerg-3620	104	2	bti	ORG
fuelectenerg-3620	104	3	four	CARDINAL
fuelectenerg-3620	104	4	1	CARDINAL
fuelectenerg-3620	104	5	nmos	PERSON
fuelectenerg-3620	104	6	2	CARDINAL
fuelectenerg-3620	104	7	nmos	PERSON
fuelectenerg-3620	105	1	3	CARDINAL
fuelectenerg-3620	105	2	pmos	PERSON
fuelectenerg-3620	106	1	4	CARDINAL
fuelectenerg-3620	106	2	pmos	PERSON
fuelectenerg-3620	107	1	bti	ORG
fuelectenerg-3620	110	1	bti	ORG
fuelectenerg-3620	111	1	23	CARDINAL
fuelectenerg-3620	111	2	24	CARDINAL
fuelectenerg-3620	112	1	the last decade	DATE
fuelectenerg-3620	112	2	bti	ORG
fuelectenerg-3620	113	1	bti	ORG
fuelectenerg-3620	114	1	bti	ORG
fuelectenerg-3620	115	1	2	CARDINAL
fuelectenerg-3620	115	2	18	CARDINAL
fuelectenerg-3620	115	3	348	CARDINAL
fuelectenerg-3620	115	4	s. shaheen	PERSON
fuelectenerg-3620	115	5	g. golan	PERSON
fuelectenerg-3620	115	6	m. azoulay	PERSON
fuelectenerg-3620	115	7	j. bernstein f-n	PERSON
fuelectenerg-3620	117	1	2	CARDINAL
fuelectenerg-3620	117	2	kelvin tstress	PERSON
fuelectenerg-3620	117	3	kelvin 𝐊	PERSON
fuelectenerg-3620	117	4	ea	CARDINAL
fuelectenerg-3620	118	1	bti	ORG
fuelectenerg-3620	119	1	2.3	CARDINAL
fuelectenerg-3620	121	1	zero	CARDINAL
fuelectenerg-3620	122	1	ec	ORG
fuelectenerg-3620	122	2	ktr	PERSON
fuelectenerg-3620	123	1	ktr	PERSON
fuelectenerg-3620	124	1	ktr	PERSON
fuelectenerg-3620	124	2	only 0.025	CARDINAL
fuelectenerg-3620	124	3	ec	ORG
fuelectenerg-3620	124	4	ev	ORG
fuelectenerg-3620	125	1	100	CARDINAL
fuelectenerg-3620	126	1	ec	ORG
fuelectenerg-3620	126	2	+ kte	PERSON
fuelectenerg-3620	126	3	kte	PERSON
fuelectenerg-3620	126	4	ktr	PERSON
fuelectenerg-3620	127	1	tens of thousands	CARDINAL
fuelectenerg-3620	128	1	vds	ORG
fuelectenerg-3620	129	1	two	CARDINAL
fuelectenerg-3620	133	1	approximately 3.2	CARDINAL
fuelectenerg-3620	133	2	4.7	CARDINAL
fuelectenerg-3620	133	3	25	CARDINAL
fuelectenerg-3620	133	4	si-sio2	ORG
fuelectenerg-3620	134	1	si-sio2	ORG
fuelectenerg-3620	135	1	si-sio2	ORG
fuelectenerg-3620	136	1	349	CARDINAL
fuelectenerg-3620	137	1	26	CARDINAL
fuelectenerg-3620	137	2	three	CARDINAL
fuelectenerg-3620	137	3	1	CARDINAL
fuelectenerg-3620	138	1	2	CARDINAL
fuelectenerg-3620	139	1	3	CARDINAL
fuelectenerg-3620	140	1	si-sio2	ORG
fuelectenerg-3620	140	2	77 k	QUANTITY
fuelectenerg-3620	141	1	27	CARDINAL
fuelectenerg-3620	144	1	fowler	ORG
fuelectenerg-3620	144	2	nordheim	GPE
fuelectenerg-3620	148	1	two	CARDINAL
fuelectenerg-3620	149	1	first	ORDINAL
fuelectenerg-3620	150	1	second	ORDINAL
fuelectenerg-3620	151	1	28	CARDINAL
fuelectenerg-3620	151	2	si-sio2	ORG
fuelectenerg-3620	156	1	first	ORDINAL
fuelectenerg-3620	161	1	350	CARDINAL
fuelectenerg-3620	161	2	s. shaheen	PERSON
fuelectenerg-3620	161	3	g. golan	PERSON
fuelectenerg-3620	161	4	m. azoulay	PERSON
fuelectenerg-3620	161	5	j. bernstein	PERSON
fuelectenerg-3620	163	1	26	CARDINAL
fuelectenerg-3620	164	1	7	CARDINAL
fuelectenerg-3620	164	2	2.0μm	CARDINAL
fuelectenerg-3620	166	1	18	CARDINAL
fuelectenerg-3620	166	2	3	CARDINAL
fuelectenerg-3620	169	1	3	CARDINAL
fuelectenerg-3620	169	2	2.4	CARDINAL
fuelectenerg-3620	176	1	cu	ORG
fuelectenerg-3620	179	1	29	CARDINAL
fuelectenerg-3620	180	1	more than 40 years	DATE
fuelectenerg-3620	181	1	two	CARDINAL
fuelectenerg-3620	182	1	29	CARDINAL
fuelectenerg-3620	184	1	30	CARDINAL
fuelectenerg-3620	184	2	4	CARDINAL
fuelectenerg-3620	185	1	4	CARDINAL
fuelectenerg-3620	185	2	ea	CARDINAL
fuelectenerg-3620	186	1	351	CARDINAL
fuelectenerg-3620	191	1	at least 106	CARDINAL
fuelectenerg-3620	191	2	28	CARDINAL
fuelectenerg-3620	196	1	two	CARDINAL
fuelectenerg-3620	202	1	5	CARDINAL
fuelectenerg-3620	202	2	18	CARDINAL
fuelectenerg-3620	204	1	5	CARDINAL
fuelectenerg-3620	205	1	2.5	CARDINAL
fuelectenerg-3620	207	1	6	CARDINAL
fuelectenerg-3620	211	1	31	CARDINAL
fuelectenerg-3620	212	1	6	CARDINAL
fuelectenerg-3620	214	1	first	ORDINAL
fuelectenerg-3620	215	1	352	CARDINAL
fuelectenerg-3620	215	2	s. shaheen	PERSON
fuelectenerg-3620	215	3	g. golan	PERSON
fuelectenerg-3620	215	4	m. azoulay	PERSON
fuelectenerg-3620	215	5	j. bernstein	PERSON
fuelectenerg-3620	216	1	7	CARDINAL
fuelectenerg-3620	216	2	7	CARDINAL
fuelectenerg-3620	219	1	6	CARDINAL
fuelectenerg-3620	219	2	watts	LOC
fuelectenerg-3620	221	1	7	CARDINAL
fuelectenerg-3620	222	1	first	ORDINAL
fuelectenerg-3620	224	1	32	CARDINAL
fuelectenerg-3620	225	1	second	ORDINAL
fuelectenerg-3620	226	1	3/2	CARDINAL
fuelectenerg-3620	228	1	33	CARDINAL
fuelectenerg-3620	231	1	only about 60	CARDINAL
fuelectenerg-3620	232	1	0.05–0.10	CARDINAL
fuelectenerg-3620	232	2	5–10	CARDINAL
fuelectenerg-3620	234	1	tenths	CARDINAL
fuelectenerg-3620	234	2	10	CARDINAL
fuelectenerg-3620	237	1	34	CARDINAL
fuelectenerg-3620	237	2	8	CARDINAL
fuelectenerg-3620	238	1	353	CARDINAL
fuelectenerg-3620	243	1	35	CARDINAL
fuelectenerg-3620	243	2	36	CARDINAL
fuelectenerg-3620	249	1	3	CARDINAL
fuelectenerg-3620	249	2	3.1	CARDINAL
fuelectenerg-3620	250	1	bti	ORG
fuelectenerg-3620	252	1	second	ORDINAL
fuelectenerg-3620	252	2	bti	ORG
fuelectenerg-3620	254	1	second	ORDINAL
fuelectenerg-3620	254	2	bti	ORG
fuelectenerg-3620	255	1	bti	ORG
fuelectenerg-3620	255	2	bti	ORG
fuelectenerg-3620	256	1	second	ORDINAL
fuelectenerg-3620	257	1	tri-gate	PERSON
fuelectenerg-3620	257	2	bti	ORG
fuelectenerg-3620	257	3	37	CARDINAL
fuelectenerg-3620	258	1	354	CARDINAL
fuelectenerg-3620	258	2	s. shaheen	PERSON
fuelectenerg-3620	258	3	g. golan	PERSON
fuelectenerg-3620	258	4	m. azoulay	PERSON
fuelectenerg-3620	258	5	j. bernstein	PERSON
fuelectenerg-3620	258	6	3.2	CARDINAL
fuelectenerg-3620	259	1	9:	PERCENT
fuelectenerg-3620	261	1	9	CARDINAL
fuelectenerg-3620	265	1	bti	ORG
fuelectenerg-3620	266	1	bti	ORG
fuelectenerg-3620	266	2	38	CARDINAL
fuelectenerg-3620	267	1	39	CARDINAL
fuelectenerg-3620	267	2	40	CARDINAL
fuelectenerg-3620	267	3	10:	PERCENT
fuelectenerg-3620	269	1	gs	ORG
fuelectenerg-3620	269	2	10	CARDINAL
fuelectenerg-3620	269	3	9	CARDINAL
fuelectenerg-3620	269	4	10	CARDINAL
fuelectenerg-3620	270	1	41	CARDINAL
fuelectenerg-3620	271	1	42	CARDINAL
fuelectenerg-3620	273	1	11	CARDINAL
fuelectenerg-3620	275	1	gs	ORG
fuelectenerg-3620	275	2	11	CARDINAL
fuelectenerg-3620	275	3	12	CARDINAL
fuelectenerg-3620	276	1	gs	ORG
fuelectenerg-3620	276	2	gs	ORG
fuelectenerg-3620	276	3	12	CARDINAL
fuelectenerg-3620	277	1	10	CARDINAL
fuelectenerg-3620	278	1	10	CARDINAL
fuelectenerg-3620	279	1	43	CARDINAL
fuelectenerg-3620	281	1	poisson	PERSON
fuelectenerg-3620	281	2	44	CARDINAL
fuelectenerg-3620	281	3	45	CARDINAL
fuelectenerg-3620	282	1	bti	ORG
fuelectenerg-3620	282	2	355	CARDINAL
fuelectenerg-3620	287	1	bti	ORG
fuelectenerg-3620	289	1	13	CARDINAL
fuelectenerg-3620	290	1	13	CARDINAL
fuelectenerg-3620	291	1	3.3	CARDINAL
fuelectenerg-3620	292	1	three	CARDINAL
fuelectenerg-3620	293	1	110	CARDINAL
fuelectenerg-3620	294	1	46	CARDINAL
fuelectenerg-3620	295	1	47	CARDINAL
fuelectenerg-3620	296	1	48	CARDINAL
fuelectenerg-3620	297	1	49	CARDINAL
fuelectenerg-3620	298	1	bti	ORG
fuelectenerg-3620	298	2	bti	ORG
fuelectenerg-3620	298	3	50	CARDINAL
fuelectenerg-3620	298	4	51	DATE
fuelectenerg-3620	298	5	52	CARDINAL
fuelectenerg-3620	299	1	pmos nbti	PERSON
fuelectenerg-3620	300	1	tri-gate	PERSON
fuelectenerg-3620	301	1	bti	ORG
fuelectenerg-3620	302	1	22	CARDINAL
fuelectenerg-3620	302	2	tri-gate	PERSON
fuelectenerg-3620	302	3	50	CARDINAL
fuelectenerg-3620	305	1	53,54	CARDINAL
fuelectenerg-3620	308	1	356	CARDINAL
fuelectenerg-3620	308	2	s. shaheen	PERSON
fuelectenerg-3620	308	3	g. golan	PERSON
fuelectenerg-3620	308	4	m. azoulay	PERSON
fuelectenerg-3620	308	5	j. bernstein	PERSON
fuelectenerg-3620	316	1	2	CARDINAL
fuelectenerg-3620	317	1	nmos hc	PERSON
fuelectenerg-3620	321	1	14	CARDINAL
fuelectenerg-3620	326	1	2	CARDINAL
fuelectenerg-3620	326	2	54	CARDINAL
fuelectenerg-3620	327	1	14	CARDINAL
fuelectenerg-3620	329	1	ec	ORG
fuelectenerg-3620	329	2	14	CARDINAL
fuelectenerg-3620	329	3	bti	ORG
fuelectenerg-3620	330	1	bti	ORG
fuelectenerg-3620	330	2	55	CARDINAL
fuelectenerg-3620	332	1	53	CARDINAL
fuelectenerg-3620	333	1	54	CARDINAL
fuelectenerg-3620	334	1	357	CARDINAL
fuelectenerg-3620	336	1	47	CARDINAL
fuelectenerg-3620	336	2	fig.3	GPE
fuelectenerg-3620	339	1	3	CARDINAL
fuelectenerg-3620	341	1	49	CARDINAL
fuelectenerg-3620	341	2	54	CARDINAL
fuelectenerg-3620	343	1	15	CARDINAL
fuelectenerg-3620	343	2	15	CARDINAL
fuelectenerg-3620	347	1	standard dc	GPE
fuelectenerg-3620	349	1	55	CARDINAL
fuelectenerg-3620	351	1	4	CARDINAL
fuelectenerg-3620	351	2	358	CARDINAL
fuelectenerg-3620	351	3	s. shaheen	PERSON
fuelectenerg-3620	351	4	g. golan	PERSON
fuelectenerg-3620	351	5	m. azoulay	PERSON
fuelectenerg-3620	351	6	j. bernstein 5	PERSON
fuelectenerg-3620	351	7	50	CARDINAL
fuelectenerg-3620	351	8	56	CARDINAL
fuelectenerg-3620	359	1	4	CARDINAL
fuelectenerg-3620	360	1	48	CARDINAL
fuelectenerg-3620	361	1	5	CARDINAL
fuelectenerg-3620	362	1	55	CARDINAL
fuelectenerg-3620	366	1	359	CARDINAL
fuelectenerg-3620	370	1	57	CARDINAL
fuelectenerg-3620	371	1	one	CARDINAL
fuelectenerg-3620	376	1	one	CARDINAL
fuelectenerg-3620	376	2	sio2	ORG
fuelectenerg-3620	376	3	hfo2	ORG
fuelectenerg-3620	378	1	al	ORG
fuelectenerg-3620	378	2	180	CARDINAL
fuelectenerg-3620	379	1	130	CARDINAL
fuelectenerg-3620	383	1	vdd	ORG
fuelectenerg-3620	385	1	two	CARDINAL
fuelectenerg-3620	385	2	1	CARDINAL
fuelectenerg-3620	385	3	2	CARDINAL
fuelectenerg-3620	386	1	2-d to	QUANTITY
fuelectenerg-3620	386	2	3-d	QUANTITY
fuelectenerg-3620	387	1	feol[58	GPE
fuelectenerg-3620	388	1	59	CARDINAL
fuelectenerg-3620	393	1	16	CARDINAL
fuelectenerg-3620	394	1	16	CARDINAL
fuelectenerg-3620	394	2	s. shaheen	PERSON
fuelectenerg-3620	394	3	g. golan	PERSON
fuelectenerg-3620	394	4	m. azoulay	PERSON
fuelectenerg-3620	394	5	j. bernstein	PERSON
fuelectenerg-3620	394	6	w	GPE
fuelectenerg-3620	395	1	w	ORG
fuelectenerg-3620	395	2	0.7	CARDINAL
fuelectenerg-3620	395	3	about 50%	PERCENT
fuelectenerg-3620	396	1	180	CARDINAL
fuelectenerg-3620	396	2	10	CARDINAL
fuelectenerg-3620	396	3	the cu cross sectional area	ORG
fuelectenerg-3620	396	4	0.03	CARDINAL
fuelectenerg-3620	396	5	2	CARDINAL
fuelectenerg-3620	396	6	0.0015	CARDINAL
fuelectenerg-3620	396	7	2	CARDINAL
fuelectenerg-3620	396	8	95%	PERCENT
fuelectenerg-3620	397	1	1.8	CARDINAL
fuelectenerg-3620	397	2	0.9	CARDINAL
fuelectenerg-3620	397	3	50%	PERCENT
fuelectenerg-3620	398	1	10	CARDINAL
fuelectenerg-3620	402	1	two	CARDINAL
fuelectenerg-3620	402	2	al	PERSON
fuelectenerg-3620	403	1	60	CARDINAL
fuelectenerg-3620	403	2	1083	CARDINAL
fuelectenerg-3620	403	3	660	CARDINAL
fuelectenerg-3620	403	4	0.9	CARDINAL
fuelectenerg-3620	403	5	0.8 ev	QUANTITY
fuelectenerg-3620	406	1	61	CARDINAL
fuelectenerg-3620	406	2	62	DATE
fuelectenerg-3620	406	3	17	CARDINAL
fuelectenerg-3620	406	4	17	CARDINAL
fuelectenerg-3620	407	1	18	CARDINAL
fuelectenerg-3620	407	2	18	CARDINAL
fuelectenerg-3620	408	1	zero	CARDINAL
fuelectenerg-3620	409	1	19can	CARDINAL
fuelectenerg-3620	409	2	jl)c	ORG
fuelectenerg-3620	409	3	19	CARDINAL
fuelectenerg-3620	409	4	jl)c	ORG
fuelectenerg-3620	409	5	63	CARDINAL
fuelectenerg-3620	410	1	jl)c	ORG
fuelectenerg-3620	411	1	jl)c	ORG
fuelectenerg-3620	411	2	20	CARDINAL
fuelectenerg-3620	412	1	64	CARDINAL
fuelectenerg-3620	414	1	20	CARDINAL
fuelectenerg-3620	414	2	max	PERSON
fuelectenerg-3620	414	3	50stress	CARDINAL
fuelectenerg-3620	416	1	jc	PERSON
fuelectenerg-3620	418	1	361	CARDINAL
fuelectenerg-3620	421	1	20	CARDINAL
fuelectenerg-3620	422	1	jmax de-rating	PERSON
fuelectenerg-3620	425	1	jl)c	ORG
fuelectenerg-3620	425	2	65	CARDINAL
fuelectenerg-3620	425	3	jl)c	ORG
fuelectenerg-3620	428	1	66	CARDINAL
fuelectenerg-3620	428	2	67	CARDINAL
fuelectenerg-3620	429	1	one	CARDINAL
fuelectenerg-3620	430	1	68].those	CARDINAL
fuelectenerg-3620	430	2	the cu diffusion	ORG
fuelectenerg-3620	431	1	one	CARDINAL
fuelectenerg-3620	431	2	66	CARDINAL
fuelectenerg-3620	434	1	jl)c	ORG
fuelectenerg-3620	434	2	eda	ORG
fuelectenerg-3620	436	1	jl)c	ORG
fuelectenerg-3620	438	1	4	CARDINAL
fuelectenerg-3620	441	1	one	CARDINAL
fuelectenerg-3620	442	1	bti	ORG
fuelectenerg-3620	444	1	362	CARDINAL
fuelectenerg-3620	444	2	s. shaheen	PERSON
fuelectenerg-3620	444	3	g. golan	PERSON
fuelectenerg-3620	444	4	m. azoulay	PERSON
fuelectenerg-3620	444	5	j. bernstein	PERSON
fuelectenerg-3620	445	1	6	CARDINAL
fuelectenerg-3620	447	1	68	CARDINAL
fuelectenerg-3620	449	1	one	CARDINAL
fuelectenerg-3620	450	1	bti	ORG
fuelectenerg-3620	451	1	pmos nbti	PERSON
fuelectenerg-3620	453	1	21	CARDINAL
fuelectenerg-3620	454	1	21	CARDINAL
fuelectenerg-3620	454	2	bti	ORG
fuelectenerg-3620	455	1	bti	ORG
fuelectenerg-3620	457	1	69	CARDINAL
fuelectenerg-3620	459	1	7	CARDINAL
fuelectenerg-3620	459	2	363	CARDINAL
fuelectenerg-3620	459	3	69	CARDINAL
fuelectenerg-3620	475	1	5	CARDINAL
fuelectenerg-3620	475	2	bti	ORG
fuelectenerg-3620	478	1	bti	ORG
fuelectenerg-3620	479	1	69	CARDINAL
fuelectenerg-3620	479	2	364	CARDINAL
fuelectenerg-3620	479	3	s. shaheen	PERSON
fuelectenerg-3620	479	4	g. golan	PERSON
fuelectenerg-3620	479	5	m. azoulay	PERSON
fuelectenerg-3620	479	6	j. bernstein	PERSON
fuelectenerg-3620	480	1	bti	ORG
fuelectenerg-3620	485	1	nbti	PERSON
fuelectenerg-3620	488	1	1	CARDINAL
fuelectenerg-3620	489	1	7	CARDINAL
fuelectenerg-3620	490	1	2.	CARDINAL
fuelectenerg-3620	491	1	bti	ORG
fuelectenerg-3620	492	1	bti	ORG
fuelectenerg-3620	493	1	3	CARDINAL
fuelectenerg-3620	497	1	1	CARDINAL
fuelectenerg-3620	497	2	114–117	CARDINAL
fuelectenerg-3620	497	3	19, 2001	DATE
fuelectenerg-3620	498	1	2	CARDINAL
fuelectenerg-3620	500	1	monroe	GPE
fuelectenerg-3620	500	2	j.m.	GPE
fuelectenerg-3620	500	3	21	CARDINAL
fuelectenerg-3620	500	4	9, 445447	DATE
fuelectenerg-3620	500	5	2000	DATE
fuelectenerg-3620	501	1	3	CARDINAL
fuelectenerg-3620	501	2	g. e. moore	PERSON
fuelectenerg-3620	502	1	38	CARDINAL
fuelectenerg-3620	502	2	114–117	CARDINAL
fuelectenerg-3620	502	3	april 19, 1965	DATE
fuelectenerg-3620	503	1	4	CARDINAL
fuelectenerg-3620	503	2	s. thompson	PERSON
fuelectenerg-3620	503	3	m. ohr	PERSON
fuelectenerg-3620	503	4	―mos	PERSON
fuelectenerg-3620	503	5	21st	ORDINAL
fuelectenerg-3620	503	6	intel technology journal	ORG
fuelectenerg-3620	504	1	2	CARDINAL
fuelectenerg-3620	505	1	1–19, 1998	DATE
fuelectenerg-3620	506	1	5	CARDINAL
fuelectenerg-3620	506	2	k. j. kuhn	PERSON
fuelectenerg-3620	506	3	―cmos	NORP
fuelectenerg-3620	506	4	22	CARDINAL
fuelectenerg-3620	506	5	apr. 2011	DATE
fuelectenerg-3620	508	1	6	CARDINAL
fuelectenerg-3620	508	2	k. bernstein	PERSON
fuelectenerg-3620	508	3	d. j. frank	PERSON
fuelectenerg-3620	508	4	a. e. gattiker	PERSON
fuelectenerg-3620	508	5	w. haensch	PERSON
fuelectenerg-3620	508	6	b. l. ji	PERSON
fuelectenerg-3620	508	7	s. r. nassif	PERSON
fuelectenerg-3620	508	8	e. j. nowak	PERSON
fuelectenerg-3620	508	9	d. j.pearson	PERSON
fuelectenerg-3620	508	10	n. j. rohrer	PERSON
fuelectenerg-3620	508	11	65	CARDINAL
fuelectenerg-3620	508	12	ibm	ORG
fuelectenerg-3620	508	13	50	CARDINAL
fuelectenerg-3620	509	1	433–449	CARDINAL
fuelectenerg-3620	509	2	jul-sep 2006	DATE
fuelectenerg-3620	510	1	https://www.researchgate.net/publication/2985293_cramming_more_components_onto_integrated_circuits?el=1_x_8&enrichid=rgreq-d53d2898-5e0d-4d8d-ba15-6a400a9455e7&enrichsource=y292zxjqywdlozi2otgxodcwmjtbuzoxnzy5nzyymtiwmtmwntzamtqxotiwntgyntq4mw== https://www.researchgate.net/publication/2985293_cramming_more_components_onto_integrated_circuits?el=1_x_8&enrichid=rgreq-d53d2898-5e0d-4d8d-ba15-6a400a9455e7&enrichsource=y292zxjqywdlozi2otgxodcwmjtbuzoxnzy5nzyymtiwmtmwntzamtqxotiwntgyntq4mw==	ORG
fuelectenerg-3620	510	2	https://www.researchgate.net/publication/2985293_cramming_more_components_onto_integrated_circuits?el=1_x_8&enrichid=rgreq-d53d2898-5e0d-4d8d-ba15-6a400a9455e7&enrichsource=y292zxjqywdlozi2otgxodcwmjtbuzoxnzy5nzyymtiwmtmwntzamtqxotiwntgyntq4mw==	GPE
fuelectenerg-3620	510	3	https://www.researchgate.net/publication/242353242_mos_scaling_transistor_challenges_for_the_21st_century?el=1_x_8&enrichid=rgreq-d53d2898-5e0d-4d8d-ba15-6a400a9455e7&enrichsource=y292zxjqywdlozi2otgxodcwmjtbuzoxnzy5nzyymtiwmtmwntzamtqxotiwntgyntq4mw== https://www.researchgate.net/publication/242353242_mos_scaling_transistor_challenges_for_the_21st_century?el=1_x_8&enrichid=rgreq-d53d2898-5e0d-4d8d-ba15-6a400a9455e7&enrichsource=y292zxjqywdlozi2otgxodcwmjtbuzoxnzy5nzyymtiwmtmwntzamtqxotiwntgyntq4mw== https://www.researchgate.net/publication/242353242_mos_scaling_transistor_challenges_for_the_21st_century?el=1_x_8&enrichid=rgreq-d53d2898-5e0d-4d8d-ba15-6a400a9455e7&enrichsource=y292zxjqywdlozi2otgxodcwmjtbuzoxnzy5nzyymtiwmtmwntzamtqxotiwntgyntq4mw==	TIME
fuelectenerg-3620	510	4	finfet 365	DATE
fuelectenerg-3620	510	5	7	CARDINAL
fuelectenerg-3620	511	1	k. schroder	PERSON
fuelectenerg-3620	511	2	j. a. abcock	PERSON
fuelectenerg-3620	511	3	94	DATE
fuelectenerg-3620	512	1	1–18	CARDINAL
fuelectenerg-3620	512	2	jul. 2003	DATE
fuelectenerg-3620	513	1	8	CARDINAL
fuelectenerg-3620	513	2	x. wang	PERSON
fuelectenerg-3620	514	1	cheng	PERSON
fuelectenerg-3620	514	2	a. .	PERSON
fuelectenerg-3620	515	1	rown	PERSON
fuelectenerg-3620	515	2	c. millar	PERSON
fuelectenerg-3620	515	3	j. .	PERSON
fuelectenerg-3620	516	1	kuang	PERSON
fuelectenerg-3620	516	2	s. nassif	PERSON
fuelectenerg-3620	516	3	a. asenov	PERSON
fuelectenerg-3620	516	4	―statisticalvariability	ORG
fuelectenerg-3620	517	1	1–4, 2011	DATE
fuelectenerg-3620	518	1	9	CARDINAL
fuelectenerg-3620	518	2	j. roussel	PERSON
fuelectenerg-3620	518	3	j. franco	PERSON
fuelectenerg-3620	518	4	r. degraeve	PERSON
fuelectenerg-3620	518	5	l. ragnarsson	PERSON
fuelectenerg-3620	518	6	e. simoen	PERSON
fuelectenerg-3620	518	7	g. groeseneken	PERSON
fuelectenerg-3620	518	8	h. eisinger	PERSON
fuelectenerg-3620	519	1	2010	DATE
fuelectenerg-3620	521	1	10	CARDINAL
fuelectenerg-3620	521	2	p. amink	PERSON
fuelectenerg-3620	521	3	m. van ort	PERSON
fuelectenerg-3620	521	4	c. juffermans et al	GPE
fuelectenerg-3620	522	1	1991	DATE
fuelectenerg-3620	523	1	537–540	CARDINAL
fuelectenerg-3620	524	1	11	CARDINAL
fuelectenerg-3620	524	2	y. lee	PERSON
fuelectenerg-3620	524	3	m. agostinelli	PERSON
fuelectenerg-3620	524	4	s. gupta	PERSON
fuelectenerg-3620	525	1	w. mcmahon	PERSON
fuelectenerg-3620	525	2	2006	DATE
fuelectenerg-3620	526	1	18–28	CARDINAL
fuelectenerg-3620	527	1	12	CARDINAL
fuelectenerg-3620	527	2	2009	DATE
fuelectenerg-3620	529	1	13	CARDINAL
fuelectenerg-3620	529	2	v. huard	PERSON
fuelectenerg-3620	529	3	f. cacho	PERSON
fuelectenerg-3620	529	4	y. mamy andriamihaja	ORG
fuelectenerg-3620	529	5	a. ravaix	PERSON
fuelectenerg-3620	530	1	eng	GPE
fuelectenerg-3620	530	2	88	DATE
fuelectenerg-3620	530	3	7	CARDINAL
fuelectenerg-3620	531	1	jul.2011	ORG
fuelectenerg-3620	532	1	14	CARDINAL
fuelectenerg-3620	532	2	v. huard v, f. cacho	PERSON
fuelectenerg-3620	532	3	y. mamy randriamihaja	ORG
fuelectenerg-3620	532	4	a. bravaix	PERSON
fuelectenerg-3620	532	5	microelectro	FAC
fuelectenerg-3620	533	1	eng	PERSON
fuelectenerg-3620	533	2	88	DATE
fuelectenerg-3620	533	3	1396-1407, 2011	DATE
fuelectenerg-3620	534	1	15	CARDINAL
fuelectenerg-3620	535	1	jep-122g	PERSON
fuelectenerg-3620	535	2	october 2011	DATE
fuelectenerg-3620	536	1	16	CARDINAL
fuelectenerg-3620	536	2	joseph b bernstein	PERSON
fuelectenerg-3620	536	3	gurfinkel moshe	PERSON
fuelectenerg-3620	536	4	li xiaojun	PERSON
fuelectenerg-3620	536	5	walters jörg	PERSON
fuelectenerg-3620	536	6	shapira yoram	PERSON
fuelectenerg-3620	536	7	michael	PERSON
fuelectenerg-3620	536	8	microelectron	ORG
fuelectenerg-3620	536	9	46	DATE
fuelectenerg-3620	537	1	1957–1979, 2006	DATE
fuelectenerg-3620	538	1	17	CARDINAL
fuelectenerg-3620	538	2	8	CARDINAL
fuelectenerg-3620	539	1	125–149, 1960	DATE
fuelectenerg-3620	540	1	18	CARDINAL
fuelectenerg-3620	540	2	joseph b. bernstein	PERSON
fuelectenerg-3620	540	3	alain bensoussan	PERSON
fuelectenerg-3620	540	4	emmanuel bender	PERSON
fuelectenerg-3620	541	1	19	CARDINAL
fuelectenerg-3620	541	2	y. matukura	PERSON
fuelectenerg-3620	541	3	―investigation	CARDINAL
fuelectenerg-3620	541	4	japanese	NORP
fuelectenerg-3620	541	5	5	CARDINAL
fuelectenerg-3620	542	1	180, 1966	DATE
fuelectenerg-3620	542	2	20	CARDINAL
fuelectenerg-3620	542	3	s. khan	PERSON
fuelectenerg-3620	542	4	s. hamdioui	PERSON
fuelectenerg-3620	542	5	h. kükner	PERSON
fuelectenerg-3620	542	6	p. aghavan	PERSON
fuelectenerg-3620	542	7	f. catthoor	PERSON
fuelectenerg-3620	542	8	15thinternational	CARDINAL
fuelectenerg-3620	542	9	ddecs	GPE
fuelectenerg-3620	542	10	2012	DATE
fuelectenerg-3620	543	1	348–353	CARDINAL
fuelectenerg-3620	544	1	21	CARDINAL
fuelectenerg-3620	544	2	h. kükner	PERSON
fuelectenerg-3620	544	3	p. weckx	PERSON
fuelectenerg-3620	544	4	b. kaczer	PERSON
fuelectenerg-3620	544	5	f. catthoor	PERSON
fuelectenerg-3620	544	6	l. van der perre	PERSON
fuelectenerg-3620	544	7	r. lauwereins	PERSON
fuelectenerg-3620	544	8	g. groeseneken	PERSON
fuelectenerg-3620	544	9	15theuromicro	CARDINAL
fuelectenerg-3620	545	1	dsd	ORG
fuelectenerg-3620	545	2	2012	DATE
fuelectenerg-3620	547	1	22	CARDINAL
fuelectenerg-3620	547	2	v. huard	PERSON
fuelectenerg-3620	547	3	m. ennis	PERSON
fuelectenerg-3620	547	4	c. parthasarathy	PERSON
fuelectenerg-3620	547	5	46	DATE
fuelectenerg-3620	548	1	1–23, 2006	DATE
fuelectenerg-3620	549	1	23	CARDINAL
fuelectenerg-3620	550	1	w.	PERSON
fuelectenerg-3620	550	2	t. aichinger	GPE
fuelectenerg-3620	550	3	p. hehenberger	PERSON
fuelectenerg-3620	550	4	m. nelhiebel	PERSON
fuelectenerg-3620	550	5	two	CARDINAL
fuelectenerg-3620	550	6	2009	DATE
fuelectenerg-3620	551	1	33–44, 2009	DATE
fuelectenerg-3620	552	1	24	CARDINAL
fuelectenerg-3620	552	2	w. wang	PERSON
fuelectenerg-3620	552	3	s. yang	PERSON
fuelectenerg-3620	552	4	s. hardwaj	PERSON
fuelectenerg-3620	552	5	s. vrudhula	PERSON
fuelectenerg-3620	552	6	t. liu	PERSON
fuelectenerg-3620	553	1	18	CARDINAL
fuelectenerg-3620	553	2	2	CARDINAL
fuelectenerg-3620	554	1	173–183, 2010	DATE
fuelectenerg-3620	555	1	25	CARDINAL
fuelectenerg-3620	555	2	g. l. rosa	PERSON
fuelectenerg-3620	556	1	sun	PERSON
fuelectenerg-3620	556	2	36	DATE
fuelectenerg-3620	557	1	845–869, 1996	DATE
fuelectenerg-3620	558	1	26	CARDINAL
fuelectenerg-3620	558	2	e. takeda	PERSON
fuelectenerg-3620	558	3	c. y. yang	PERSON
fuelectenerg-3620	558	4	a. miura-hamada	PERSON
fuelectenerg-3620	558	5	2	CARDINAL
fuelectenerg-3620	560	1	academic press	ORG
fuelectenerg-3620	560	2	1995	DATE
fuelectenerg-3620	561	1	27	CARDINAL
fuelectenerg-3620	561	2	m. song,	PERSON
fuelectenerg-3620	562	1	j. c. s. woo	PERSON
fuelectenerg-3620	562	2	300	CARDINAL
fuelectenerg-3620	562	3	77	CARDINAL
fuelectenerg-3620	562	4	k,‖ ieee	ORG
fuelectenerg-3620	563	1	44	DATE
fuelectenerg-3620	564	1	268–276, 1997	DATE
fuelectenerg-3620	565	1	28	CARDINAL
fuelectenerg-3620	565	2	m. ohring	PERSON
fuelectenerg-3620	565	3	5	CARDINAL
fuelectenerg-3620	565	4	259	CARDINAL
fuelectenerg-3620	566	1	1998	DATE
fuelectenerg-3620	567	1	29	CARDINAL
fuelectenerg-3620	567	2	d. g. pierce	PERSON
fuelectenerg-3620	567	3	p. g. rusius	PERSON
fuelectenerg-3620	567	4	37	DATE
fuelectenerg-3620	568	1	1053	CARDINAL
fuelectenerg-3620	568	2	1072, 1997	DATE
fuelectenerg-3620	569	1	30	CARDINAL
fuelectenerg-3620	570	1	6th	ORDINAL
fuelectenerg-3620	571	1	148–159, 1967	DATE
fuelectenerg-3620	572	1	31	CARDINAL
fuelectenerg-3620	573	1	s. atta	PERSON
fuelectenerg-3620	576	1	46	DATE
fuelectenerg-3620	576	2	8	CARDINAL
fuelectenerg-3620	577	1	4757–4763, 1992	DATE
fuelectenerg-3620	577	2	32	CARDINAL
fuelectenerg-3620	579	1	75	CARDINAL
fuelectenerg-3620	579	2	2	CARDINAL
fuelectenerg-3620	580	1	942–957, 1994	DATE
fuelectenerg-3620	581	1	33	CARDINAL
fuelectenerg-3620	582	1	j. lai	PERSON
fuelectenerg-3620	582	2	a. majumdar	PERSON
fuelectenerg-3620	583	1	79	DATE
fuelectenerg-3620	583	2	9	CARDINAL
fuelectenerg-3620	584	1	7353–7361, 1996	DATE
fuelectenerg-3620	585	1	34	CARDINAL
fuelectenerg-3620	585	2	m. artaki	PERSON
fuelectenerg-3620	585	3	j. price	PERSON
fuelectenerg-3620	585	4	j. appl	PERSON
fuelectenerg-3620	586	1	65	DATE
fuelectenerg-3620	586	2	3	CARDINAL
fuelectenerg-3620	587	1	1317–1320, 1989	DATE
fuelectenerg-3620	588	1	35	CARDINAL
fuelectenerg-3620	588	2	s. m. goodnick	PERSON
fuelectenerg-3620	588	3	―nonequilibrium longitudinal-optical phonon	ORG
fuelectenerg-3620	588	4	gaas	GPE
fuelectenerg-3620	588	5	quantum	ORG
fuelectenerg-3620	589	1	lett.	PERSON
fuelectenerg-3620	590	1	59	DATE
fuelectenerg-3620	590	2	6	CARDINAL
fuelectenerg-3620	591	1	1987	DATE
fuelectenerg-3620	592	1	36	CARDINAL
fuelectenerg-3620	592	2	s. amey et al	PERSON
fuelectenerg-3620	592	3	2009	DATE
fuelectenerg-3620	594	1	1023-1027	CARDINAL
fuelectenerg-3620	595	1	37	CARDINAL
fuelectenerg-3620	595	2	s. ramey	PERSON
fuelectenerg-3620	595	3	y. lu	PERSON
fuelectenerg-3620	595	4	i. meric	PERSON
fuelectenerg-3620	595	5	s. mudanai	PERSON
fuelectenerg-3620	595	6	s. novak	PERSON
fuelectenerg-3620	595	7	c. prasad	PERSON
fuelectenerg-3620	595	8	j. hicks	PERSON
fuelectenerg-3620	596	1	2015	DATE
fuelectenerg-3620	597	1	56-62	DATE
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fuelectenerg-3620	598	2	https://www.researchgate.net/publication/224147129_origin_of_nbti_variability_in_deeply_scaled_pfets?el=1_x_8&enrichid=rgreq-d53d2898-5e0d-4d8d-ba15-6a400a9455e7&enrichsource=y292zxjqywdlozi2otgxodcwmjtbuzoxnzy5nzyymtiwmtmwntzamtqxotiwntgyntq4mw== https://www.researchgate.net/publication/224147129_origin_of_nbti_variability_in_deeply_scaled_pfets?el=1_x_8&enrichid=rgreq-d53d2898-5e0d-4d8d-ba15-6a400a9455e7&enrichsource=y292zxjqywdlozi2otgxodcwmjtbuzoxnzy5nzyymtiwmtmwntzamtqxotiwntgyntq4mw== https://www.researchgate.net/publication/224147129_origin_of_nbti_variability_in_deeply_scaled_pfets?el=1_x_8&enrichid=rgreq-d53d2898-5e0d-4d8d-ba15-6a400a9455e7&enrichsource=y292zxjqywdlozi2otgxodcwmjtbuzoxnzy5nzyymtiwmtmwntzamtqxotiwntgyntq4mw== https://www.researchgate.net/publication/224147129_origin_of_nbti_variability_in_deeply_scaled_pfets?el=1_x_8&enrichid=rgreq-d53d2898-5e0d-4d8d-ba15-6a400a9455e7&enrichsource=y292zxjqywdlozi2otgxodcwmjtbuzoxnzy5nzyymtiwmtmwntzamtqxotiwntgyntq4mw== https://www.researchgate.net/publication/224672870_prediction_of_logic_product_failure_due_to_thin-gate_oxide_breakdown?el=1_x_8&enrichid=rgreq-d53d2898-5e0d-4d8d-ba15-6a400a9455e7&enrichsource=y292zxjqywdlozi2otgxodcwmjtbuzoxnzy5nzyymtiwmtmwntzamtqxotiwntgyntq4mw== https://www.researchgate.net/publication/224672870_prediction_of_logic_product_failure_due_to_thin-gate_oxide_breakdown?el=1_x_8&enrichid=rgreq-d53d2898-5e0d-4d8d-ba15-6a400a9455e7&enrichsource=y292zxjqywdlozi2otgxodcwmjtbuzoxnzy5nzyymtiwmtmwntzamtqxotiwntgyntq4mw== https://www.researchgate.net/publication/224672870_prediction_of_logic_product_failure_due_to_thin-gate_oxide_breakdown?el=1_x_8&enrichid=rgreq-d53d2898-5e0d-4d8d-ba15-6a400a9455e7&enrichsource=y292zxjqywdlozi2otgxodcwmjtbuzoxnzy5nzyymtiwmtmwntzamtqxotiwntgyntq4mw==	PERSON
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fuelectenerg-3620	668	4	3f2	DATE
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