id	sid	eid	entity	type
fuelectenerg-384	1	1	28	CARDINAL
fuelectenerg-384	1	2	march 2015	DATE
fuelectenerg-384	2	1	113 122	CARDINAL
fuelectenerg-384	2	2	10.2298	CARDINAL
fuelectenerg-384	2	3	mim	PERSON
fuelectenerg-384	2	4	matroni koutsoureli	PERSON
fuelectenerg-384	2	5	eleni papandreou	PERSON
fuelectenerg-384	2	6	george papaioannou	PERSON
fuelectenerg-384	2	7	national kapodistrian university of athens	ORG
fuelectenerg-384	2	8	panepistimiopolis zografos	GPE
fuelectenerg-384	2	9	athens	GPE
fuelectenerg-384	2	10	15784	DATE
fuelectenerg-384	2	11	greece	GPE
fuelectenerg-384	3	1	mim	PERSON
fuelectenerg-384	4	1	mim	ORG
fuelectenerg-384	5	1	mim	PERSON
fuelectenerg-384	5	2	dc	GPE
fuelectenerg-384	5	3	kelvin	PERSON
fuelectenerg-384	6	1	sinx	ORG
fuelectenerg-384	6	2	mim	ORG
fuelectenerg-384	7	1	mim	ORG
fuelectenerg-384	7	2	1	CARDINAL
fuelectenerg-384	8	1	introduction micro electro mechanical system	ORG
fuelectenerg-384	8	2	the last two decades	DATE
fuelectenerg-384	8	3	1	CARDINAL
fuelectenerg-384	10	1	three	CARDINAL
fuelectenerg-384	11	1	two	CARDINAL
fuelectenerg-384	11	2	2	CARDINAL
fuelectenerg-384	11	3	5,6	CARDINAL
fuelectenerg-384	13	1	third	ORDINAL
fuelectenerg-384	13	2	july 28, 2014	DATE
fuelectenerg-384	13	3	september 24, 2014	DATE
fuelectenerg-384	13	4	national kapodistrian university of athens	ORG
fuelectenerg-384	13	5	panepistimiopolis zografos	GPE
fuelectenerg-384	13	6	athens	GPE
fuelectenerg-384	13	7	15784	DATE
fuelectenerg-384	13	8	greece	GPE
fuelectenerg-384	13	9	114	CARDINAL
fuelectenerg-384	13	10	m. koutsoureli	PERSON
fuelectenerg-384	13	11	e. papandreou	PERSON
fuelectenerg-384	13	12	a. gantis	PERSON
fuelectenerg-384	15	1	sinx	ORG
fuelectenerg-384	15	2	longer than 10 4	QUANTITY
fuelectenerg-384	15	3	sec	ORG
fuelectenerg-384	15	4	7	CARDINAL
fuelectenerg-384	17	1	the last years	DATE
fuelectenerg-384	17	2	10	CARDINAL
fuelectenerg-384	18	1	mim	ORG
fuelectenerg-384	19	1	mim	PERSON
fuelectenerg-384	19	2	dct	ORG
fuelectenerg-384	20	1	11	CARDINAL
fuelectenerg-384	21	1	12,13	CARDINAL
fuelectenerg-384	21	2	kelvin	PERSON
fuelectenerg-384	22	1	14	CARDINAL
fuelectenerg-384	23	1	mim	ORG
fuelectenerg-384	23	2	15	CARDINAL
fuelectenerg-384	23	3	16	CARDINAL
fuelectenerg-384	24	1	mim	ORG
fuelectenerg-384	25	1	two	CARDINAL
fuelectenerg-384	26	1	mim	ORG
fuelectenerg-384	26	2	mim	ORG
fuelectenerg-384	27	1	mim	PERSON
fuelectenerg-384	27	2	dc	GPE
fuelectenerg-384	27	3	kelvin	PERSON
fuelectenerg-384	27	4	kp	ORG
fuelectenerg-384	28	1	19	CARDINAL
fuelectenerg-384	28	2	mim	PERSON
fuelectenerg-384	29	1	mim	ORG
fuelectenerg-384	30	1	2	CARDINAL
fuelectenerg-384	30	2	mim	PERSON
fuelectenerg-384	32	1	250	CARDINAL
fuelectenerg-384	32	2	300	CARDINAL
fuelectenerg-384	33	1	2 μm	QUANTITY
fuelectenerg-384	33	2	2μm	ORDINAL
fuelectenerg-384	33	3	k6517a	PRODUCT
fuelectenerg-384	34	1	mim	ORG
fuelectenerg-384	34	2	115	CARDINAL
fuelectenerg-384	34	3	boonton	GPE
fuelectenerg-384	35	1	2 hours	TIME
fuelectenerg-384	35	2	140	CARDINAL
fuelectenerg-384	36	1	kelvin	PERSON
fuelectenerg-384	36	2	mim	PERSON
fuelectenerg-384	37	1	kelvin	PERSON
fuelectenerg-384	38	1	3	CARDINAL
fuelectenerg-384	41	1	a few kv/cm	QUANTITY
fuelectenerg-384	43	1	3.1	CARDINAL
fuelectenerg-384	43	2	mim	PERSON
fuelectenerg-384	46	1	21,22	CARDINAL
fuelectenerg-384	48	1	j ae kt	PERSON
fuelectenerg-384	48	2		PERSON
fuelectenerg-384	48	3	1	CARDINAL
fuelectenerg-384	48	4	k	PERSON
fuelectenerg-384	50	1	1	CARDINAL
fuelectenerg-384	51	1	500 kv/cm	QUANTITY
fuelectenerg-384	52	1	116 l. michalas	QUANTITY
fuelectenerg-384	52	2	m. koutsoureli	PERSON
fuelectenerg-384	52	3	e. papandreou	PERSON
fuelectenerg-384	52	4	a. gantis	PERSON
fuelectenerg-384	52	5	g. papaioannou	PERSON
fuelectenerg-384	53	1	1	CARDINAL
fuelectenerg-384	54	1	2	CARDINAL
fuelectenerg-384	54	2	500 kv/cm	QUANTITY
fuelectenerg-384	55	1	fig	ORG
fuelectenerg-384	56	1	2	CARDINAL
fuelectenerg-384	56	2	2	CARDINAL
fuelectenerg-384	57	1	eq.2	PERSON
fuelectenerg-384	58	1	2	CARDINAL
fuelectenerg-384	58	2	3.2	DATE
fuelectenerg-384	59	1	mim	PERSON
fuelectenerg-384	60	1	mim	PERSON
fuelectenerg-384	62	1	j t j 	PERSON
fuelectenerg-384	62	2	3	CARDINAL
fuelectenerg-384	62	3	jleak	PERSON
fuelectenerg-384	63	1	3	CARDINAL
fuelectenerg-384	65	1	t o j	DATE
fuelectenerg-384	65	2	dt	GPE
fuelectenerg-384	65	3	4	CARDINAL
fuelectenerg-384	66	1	1mv/cm	PRODUCT
fuelectenerg-384	67	1	4	CARDINAL
fuelectenerg-384	67	2	mim	ORG
fuelectenerg-384	67	3	117	CARDINAL
fuelectenerg-384	68	1	3	CARDINAL
fuelectenerg-384	69	1	4	CARDINAL
fuelectenerg-384	70	1	4	CARDINAL
fuelectenerg-384	70	2	mim	ORG
fuelectenerg-384	71	1	5	CARDINAL
fuelectenerg-384	72	1	20	CARDINAL
fuelectenerg-384	73	1		GPE
fuelectenerg-384	73	2	5	CARDINAL
fuelectenerg-384	75	1	6	CARDINAL
fuelectenerg-384	76	1	5	CARDINAL
fuelectenerg-384	79	1	6	CARDINAL
fuelectenerg-384	80	1	5 minutes	TIME
fuelectenerg-384	80	2	1 mv/cm	QUANTITY
fuelectenerg-384	80	3	30	CARDINAL
fuelectenerg-384	81	1	mim	PERSON
fuelectenerg-384	81	2	kelvin	PERSON
fuelectenerg-384	81	3	11118	CARDINAL
fuelectenerg-384	81	4	m. koutsoureli	PERSON
fuelectenerg-384	81	5	e. papandreou	PERSON
fuelectenerg-384	81	6	a. gantis	PERSON
fuelectenerg-384	81	7	g. papaioannou	PERSON
fuelectenerg-384	81	8	19	CARDINAL
fuelectenerg-384	81	9	mim	PERSON
fuelectenerg-384	82	1	two	CARDINAL
fuelectenerg-384	83	1	1 mv/cm	QUANTITY
fuelectenerg-384	83	2	5 min	TIME
fuelectenerg-384	83	3	30	CARDINAL
fuelectenerg-384	83	4	mim	PERSON
fuelectenerg-384	83	5	200	CARDINAL
fuelectenerg-384	84	1	3.3	CARDINAL
fuelectenerg-384	89	1	mim	PERSON
fuelectenerg-384	89	2	two	CARDINAL
fuelectenerg-384	90	1	first	ORDINAL
fuelectenerg-384	96	1	7	CARDINAL
fuelectenerg-384	96	2	mim	ORG
fuelectenerg-384	96	3	up to	CARDINAL
fuelectenerg-384	96	4	30	CARDINAL
fuelectenerg-384	97	1	only 300	CARDINAL
fuelectenerg-384	97	2	sec	ORG
fuelectenerg-384	98	1	mim	ORG
fuelectenerg-384	98	2	kelvin	PERSON
fuelectenerg-384	98	3	kp	ORG
fuelectenerg-384	99	1	mim	PERSON
fuelectenerg-384	101	1	kelvin	PERSON
fuelectenerg-384	102	1	mim	PERSON
fuelectenerg-384	102	2	mim	ORG
fuelectenerg-384	103	1	10 4	DATE
fuelectenerg-384	103	2	sec	ORG
fuelectenerg-384	104	1	kelvin	PERSON
fuelectenerg-384	104	2	14	CARDINAL
fuelectenerg-384	105	1	kp	ORG
fuelectenerg-384	106	1	first	ORDINAL
fuelectenerg-384	107	1	second	ORDINAL
fuelectenerg-384	107	2	25	CARDINAL
fuelectenerg-384	108	1	mim	PERSON
fuelectenerg-384	110	1	kp	ORG
fuelectenerg-384	110	2	24	CARDINAL
fuelectenerg-384	110	3	mim	ORG
fuelectenerg-384	110	4	119	CARDINAL
fuelectenerg-384	111	1	7	CARDINAL
fuelectenerg-384	111	2	mim	ORG
fuelectenerg-384	111	3	up to	CARDINAL
fuelectenerg-384	111	4	8	CARDINAL
fuelectenerg-384	112	1	mim	ORG
fuelectenerg-384	112	2	up to	CARDINAL
fuelectenerg-384	115	1	7	CARDINAL
fuelectenerg-384	115	2	26	CARDINAL
fuelectenerg-384	117	1	9	CARDINAL
fuelectenerg-384	118	1	20	CARDINAL
fuelectenerg-384	119	1	1 mv/cm	QUANTITY
fuelectenerg-384	119	2	5 min	TIME
fuelectenerg-384	121	1	10	CARDINAL
fuelectenerg-384	122	1	10 4	DATE
fuelectenerg-384	122	2	sec	ORG
fuelectenerg-384	122	3	fig	ORG
fuelectenerg-384	123	1	9	CARDINAL
fuelectenerg-384	127	1	10	CARDINAL
fuelectenerg-384	128	1	120	CARDINAL
fuelectenerg-384	128	2	m. koutsoureli	PERSON
fuelectenerg-384	128	3	e. papandreou	PERSON
fuelectenerg-384	128	4	a. gantis	PERSON
fuelectenerg-384	128	5	g. papaioannou	PERSON
fuelectenerg-384	128	6	3.4	CARDINAL
fuelectenerg-384	129	1	mim	ORG
fuelectenerg-384	131	1	1	CARDINAL
fuelectenerg-384	131	2	mim	PERSON
fuelectenerg-384	132	1	1	CARDINAL
fuelectenerg-384	132	2	mim 250	LAW
fuelectenerg-384	132	3	mim	PERSON
fuelectenerg-384	132	4	nc/cm 2	FAC
fuelectenerg-384	132	5	30 30	DATE
fuelectenerg-384	133	1	sec	ORG
fuelectenerg-384	133	2	5	CARDINAL
fuelectenerg-384	133	3	4 3	CARDINAL
fuelectenerg-384	133	4	10	CARDINAL
fuelectenerg-384	133	5	0.9 0.4	QUANTITY
fuelectenerg-384	133	6	mim	ORG
fuelectenerg-384	134	1	mim	PERSON
fuelectenerg-384	135	1	two	CARDINAL
fuelectenerg-384	138	1	mim	PERSON
fuelectenerg-384	139	1	27	CARDINAL
fuelectenerg-384	140	1	28	CARDINAL
fuelectenerg-384	140	2	14	CARDINAL
fuelectenerg-384	141	1	mim	ORG
fuelectenerg-384	142	1	mim	ORG
fuelectenerg-384	142	2	8,9	CARDINAL
fuelectenerg-384	143	1	4	CARDINAL
fuelectenerg-384	143	2	mim	ORG
fuelectenerg-384	144	1	kelvin	PERSON
fuelectenerg-384	145	1	mim	ORG
fuelectenerg-384	145	2	121	CARDINAL
fuelectenerg-384	146	1	the dc study	ORG
fuelectenerg-384	146	2	mim	ORG
fuelectenerg-384	146	3	kelvin	PERSON
fuelectenerg-384	147	1	mim	PERSON
fuelectenerg-384	149	1	mim	PERSON
fuelectenerg-384	151	1	fp7 eniac	PERSON
fuelectenerg-384	151	2	nanocom	ORG
fuelectenerg-384	151	3	ga	ORG
fuelectenerg-384	151	4	270701-2	DATE
fuelectenerg-384	151	5	eniac	ORG
fuelectenerg-384	151	6	3	CARDINAL
fuelectenerg-384	151	7	ga	ORG
fuelectenerg-384	151	8	288531	DATE
fuelectenerg-384	152	1	1	CARDINAL
fuelectenerg-384	152	2	g.m.	PERSON
fuelectenerg-384	152	3	new york	GPE
fuelectenerg-384	152	4	j. wiley & sons	ORG
fuelectenerg-384	152	5	2003	DATE
fuelectenerg-384	153	1	2	CARDINAL
fuelectenerg-384	153	2	g. wang	PERSON
fuelectenerg-384	153	3	d. bessas	PERSON
fuelectenerg-384	153	4	j. papapolymerou	PERSON
fuelectenerg-384	153	5	1st	ORDINAL
fuelectenerg-384	155	1	circ. conf.	ORG
fuelectenerg-384	155	2	manchester uk	PERSON
fuelectenerg-384	156	1	513516	DATE
fuelectenerg-384	156	2	oct. 2006	DATE
fuelectenerg-384	157	1	3	CARDINAL
fuelectenerg-384	157	2	x. rottenberg	PERSON
fuelectenerg-384	157	3	p. soussan	PERSON
fuelectenerg-384	157	4	p. muller	PERSON
fuelectenerg-384	157	5	nolmans	NORP
fuelectenerg-384	157	6	w. de raedt	PERSON
fuelectenerg-384	157	7	tilmans	NORP
fuelectenerg-384	157	8	r. puers	PERSON
fuelectenerg-384	157	9	l. marchand	PERSON
fuelectenerg-384	157	10	i. de wolf	PERSON
fuelectenerg-384	158	1	21st	ORDINAL
fuelectenerg-384	158	2	2008	DATE
fuelectenerg-384	159	1	172	CARDINAL
fuelectenerg-384	159	2	jan. 2008	DATE
fuelectenerg-384	160	1	4	CARDINAL
fuelectenerg-384	160	2	m. koutsoureli	PERSON
fuelectenerg-384	160	3	l. michalas	PERSON
fuelectenerg-384	160	4	p. martins	PERSON
fuelectenerg-384	160	5	e. papandreou	PERSON
fuelectenerg-384	160	6	a. leuliet	PERSON
fuelectenerg-384	160	7	s. bansropun	PERSON
fuelectenerg-384	160	8	g. papaioannou	PERSON
fuelectenerg-384	160	9	a. ziaei	PERSON
fuelectenerg-384	161	1	reliab	NORP
fuelectenerg-384	163	1	53	DATE
fuelectenerg-384	164	1	1655-1658	CARDINAL
fuelectenerg-384	164	2	sep.	DATE
fuelectenerg-384	166	1	5	CARDINAL
fuelectenerg-384	166	2	a. garg	PERSON
fuelectenerg-384	166	3	a. venkattraman	PERSON
fuelectenerg-384	166	4	m. koutsoureli	PERSON
fuelectenerg-384	166	5	a. alexeenko	PERSON
fuelectenerg-384	166	6	d.	NORP
fuelectenerg-384	167	1	reliab	NORP
fuelectenerg-384	168	1	52	DATE
fuelectenerg-384	168	2	sept. 2012	DATE
fuelectenerg-384	169	1	6	CARDINAL
fuelectenerg-384	169	2	m. koutsoureli	PERSON
fuelectenerg-384	169	3	g. papaioannou	PERSON
fuelectenerg-384	170	1	lett.	GPE
fuelectenerg-384	171	1	50	CARDINAL
fuelectenerg-384	172	1	766-768	CARDINAL
fuelectenerg-384	172	2	may 2014	DATE
fuelectenerg-384	173	1	7	CARDINAL
fuelectenerg-384	173	2	m. koutsoureli	PERSON
fuelectenerg-384	173	3	l. michalas	PERSON
fuelectenerg-384	173	4	g. papaioannou	PERSON
fuelectenerg-384	175	1	reliab	NORP
fuelectenerg-384	176	1	phys	PERSON
fuelectenerg-384	177	1	symp	PERSON
fuelectenerg-384	179	1	2.5, april 2012	DATE
fuelectenerg-384	179	2	8	CARDINAL
fuelectenerg-384	179	3	i. de wolf	PERSON
fuelectenerg-384	179	4	b.k.j.c.	GPE
fuelectenerg-384	179	5	w. de raedt	PERSON
fuelectenerg-384	180	1	j. microelectromech	PERSON
fuelectenerg-384	181	1	syst	PERSON
fuelectenerg-384	181	2	16	CARDINAL
fuelectenerg-384	181	3	no.5	ORG
fuelectenerg-384	182	1	1243-1253	DATE
fuelectenerg-384	182	2	oct 2007	DATE
fuelectenerg-384	183	1	9	CARDINAL
fuelectenerg-384	183	2	r. puers	PERSON
fuelectenerg-384	183	3	r. mertens	PERSON
fuelectenerg-384	183	4	i. de wolf	PERSON
fuelectenerg-384	183	5	j. micromech	PERSON
fuelectenerg-384	184	1	microeng	GPE
fuelectenerg-384	185	1	14	DATE
fuelectenerg-384	186	1	514-521	CARDINAL
fuelectenerg-384	186	2	2004	DATE
fuelectenerg-384	186	3	10	CARDINAL
fuelectenerg-384	186	4	j. micromech	PERSON
fuelectenerg-384	190	1	22	DATE
fuelectenerg-384	191	1	074001	DATE
fuelectenerg-384	191	2	2012	DATE
fuelectenerg-384	191	3	11	CARDINAL
fuelectenerg-384	191	4	m. lamhamdi	PERSON
fuelectenerg-384	191	5	l. boudou	PERSON
fuelectenerg-384	191	6	f. coccetti	PERSON
fuelectenerg-384	191	7	j. guastavino	PERSON
fuelectenerg-384	191	8	y. segui	PERSON
fuelectenerg-384	191	9	g. papaioannou	PERSON
fuelectenerg-384	192	1	r. plana	PERSON
fuelectenerg-384	193	1	reliab	NORP
fuelectenerg-384	195	1	48	CARDINAL
fuelectenerg-384	196	1	1248-1252	DATE
fuelectenerg-384	196	2	sept. 2008	DATE
fuelectenerg-384	197	1	12	CARDINAL
fuelectenerg-384	197	2	m. koutsoureli	PERSON
fuelectenerg-384	197	3	e. papandreou	PERSON
fuelectenerg-384	197	4	l. michalas	PERSON
fuelectenerg-384	197	5	g. papaioannou	PERSON
fuelectenerg-384	200	1	90	CARDINAL
fuelectenerg-384	201	1	145	CARDINAL
fuelectenerg-384	201	2	feb. 2012	DATE
fuelectenerg-384	202	1	13	CARDINAL
fuelectenerg-384	202	2	e. papandreou	PERSON
fuelectenerg-384	202	3	g. papaioannou	PERSON
fuelectenerg-384	203	1	j. microw	PERSON
fuelectenerg-384	205	1	1	CARDINAL
fuelectenerg-384	206	1	43	CARDINAL
fuelectenerg-384	206	2	feb. 2009	DATE
fuelectenerg-384	207	1	http://ieeexplore.ieee.org/search/searchresult.jsp?searchwithin=p_authors:.qt.puers,%20r..qt.&searchwithin=p_author_ids:38367118100&newsearch=true	ORG
fuelectenerg-384	207	2	122 l. michalas	QUANTITY
fuelectenerg-384	207	3	m. koutsoureli	PERSON
fuelectenerg-384	207	4	e. papandreou	PERSON
fuelectenerg-384	207	5	a. gantis	PERSON
fuelectenerg-384	207	6	g. papaioannou	PERSON
fuelectenerg-384	208	1	14	CARDINAL
fuelectenerg-384	208	2	g.j. papaioannou	GPE
fuelectenerg-384	208	3	h. wang	PERSON
fuelectenerg-384	208	4	b. bhushan	PERSON
fuelectenerg-384	208	5	f. cocceti	PERSON
fuelectenerg-384	208	6	r. plana	PERSON
fuelectenerg-384	208	7	kelvin	PERSON
fuelectenerg-384	209	1	22	DATE
fuelectenerg-384	210	1	205708, 2011	DATE
fuelectenerg-384	210	2	15	CARDINAL
fuelectenerg-384	210	3	e. papandreou	PERSON
fuelectenerg-384	210	4	m. lamhamdi	PERSON
fuelectenerg-384	210	5	c.m.	GPE
fuelectenerg-384	210	6	g. papaioannou	PERSON
fuelectenerg-384	210	7	r. plana	PERSON
fuelectenerg-384	211	1	reliab	NORP
fuelectenerg-384	213	1	47	CARDINAL
fuelectenerg-384	214	1	1812-1817	DATE
fuelectenerg-384	214	2	sept. 2007	DATE
fuelectenerg-384	215	1	16	CARDINAL
fuelectenerg-384	215	2	r. daigler	PERSON
fuelectenerg-384	215	3	e. papandreou	PERSON
fuelectenerg-384	215	4	m. koutsoureli	PERSON
fuelectenerg-384	215	5	g. papaioannou	PERSON
fuelectenerg-384	215	6	j. papapolymerou	PERSON
fuelectenerg-384	218	1	86	CARDINAL
fuelectenerg-384	219	1	404	CARDINAL
fuelectenerg-384	219	2	mar. 2009	DATE
fuelectenerg-384	219	3	17	CARDINAL
fuelectenerg-384	219	4	g. papaioannou	PERSON
fuelectenerg-384	219	5	f. coccetti	PERSON
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