id	sid	eid	entity	type
fuelectenerg-6011	2	1	33	CARDINAL
fuelectenerg-6011	2	2	2, june 2020	DATE
fuelectenerg-6011	3	1	155	CARDINAL
fuelectenerg-6011	3	2	2020	DATE
fuelectenerg-6011	3	3	university of niš	ORG
fuelectenerg-6011	3	4	serbia	GPE
fuelectenerg-6011	3	5	nc	GPE
fuelectenerg-6011	3	6	renu rajput	PERSON
fuelectenerg-6011	3	7	rakesh vaid department of electronics	ORG
fuelectenerg-6011	3	8	university of jammu	ORG
fuelectenerg-6011	3	9	jammu	GPE
fuelectenerg-6011	3	10	india	GPE
fuelectenerg-6011	12	1	nanocrystal	ORG
fuelectenerg-6011	12	2	nc	GPE
fuelectenerg-6011	12	3	ipd	ORG
fuelectenerg-6011	12	4	1	CARDINAL
fuelectenerg-6011	13	1	today	DATE
fuelectenerg-6011	15	1	1	CARDINAL
fuelectenerg-6011	15	2	two	CARDINAL
fuelectenerg-6011	15	3	today	DATE
fuelectenerg-6011	16	1	two	CARDINAL
fuelectenerg-6011	16	2	december 26, 2019	DATE
fuelectenerg-6011	16	3	rakesh k. vaid department	PERSON
fuelectenerg-6011	16	4	university of jammu, jammu-180006, india	ORG
fuelectenerg-6011	16	5	156	CARDINAL
fuelectenerg-6011	16	6	r. rajput	PERSON
fuelectenerg-6011	16	7	r. vaid	PERSON
fuelectenerg-6011	19	1	1	CARDINAL
fuelectenerg-6011	19	2	1	CARDINAL
fuelectenerg-6011	23	1	2	CARDINAL
fuelectenerg-6011	23	2	1	CARDINAL
fuelectenerg-6011	23	3	2	CARDINAL
fuelectenerg-6011	24	1	fig	PERSON
fuelectenerg-6011	25	1	2	CARDINAL
fuelectenerg-6011	25	2	157	CARDINAL
fuelectenerg-6011	26	1	sio2	ORG
fuelectenerg-6011	29	1	many decades	DATE
fuelectenerg-6011	29	2	3	CARDINAL
fuelectenerg-6011	31	1	1.5	CARDINAL
fuelectenerg-6011	32	1	0.5	CARDINAL
fuelectenerg-6011	32	2	4	CARDINAL
fuelectenerg-6011	33	1	sio2	ORG
fuelectenerg-6011	33	2	1.5	CARDINAL
fuelectenerg-6011	33	3	5	CARDINAL
fuelectenerg-6011	34	1	6	CARDINAL
fuelectenerg-6011	35	1	sio2	PERSON
fuelectenerg-6011	36	1	sio2	ORG
fuelectenerg-6011	38	1	2.3	CARDINAL
fuelectenerg-6011	38	2	sio2	ORG
fuelectenerg-6011	38	3	25%	PERCENT
fuelectenerg-6011	38	4	several tens of seconds	QUANTITY
fuelectenerg-6011	41	1	sio2	ORG
fuelectenerg-6011	42	1	between 5 and 9	CARDINAL
fuelectenerg-6011	42	2	8	CARDINAL
fuelectenerg-6011	43	1	years	DATE
fuelectenerg-6011	43	2	10	CARDINAL
fuelectenerg-6011	46	1	10	CARDINAL
fuelectenerg-6011	49	1	11	CARDINAL
fuelectenerg-6011	50	1	12	CARDINAL
fuelectenerg-6011	52	1	158	CARDINAL
fuelectenerg-6011	52	2	r. rajput	PERSON
fuelectenerg-6011	52	3	r. vaid	GPE
fuelectenerg-6011	52	4	1	CARDINAL
fuelectenerg-6011	53	1	2	CARDINAL
fuelectenerg-6011	53	2	years) 2011	DATE
fuelectenerg-6011	53	3	100 8-9	TIME
fuelectenerg-6011	53	4	13	CARDINAL
fuelectenerg-6011	53	5	2012	DATE
fuelectenerg-6011	53	6	35	DATE
fuelectenerg-6011	53	7	100	CARDINAL
fuelectenerg-6011	53	8	8-9	TIME
fuelectenerg-6011	53	9	13	CARDINAL
fuelectenerg-6011	53	10	90 8 high-k	TIME
fuelectenerg-6011	53	11	2014	DATE
fuelectenerg-6011	53	12	90 8 high-k	TIME
fuelectenerg-6011	53	13	90 8 high-k	TIME
fuelectenerg-6011	53	14	14	CARDINAL
fuelectenerg-6011	53	15	2023 10	DATE
fuelectenerg-6011	53	16	2024 10	DATE
fuelectenerg-6011	53	17	2	CARDINAL
fuelectenerg-6011	54	1	2	CARDINAL
fuelectenerg-6011	54	2	1967	DATE
fuelectenerg-6011	55	1	13	CARDINAL
fuelectenerg-6011	57	1	years) 2011	DATE
fuelectenerg-6011	57	2	6-7	TIME
fuelectenerg-6011	57	3	10	CARDINAL
fuelectenerg-6011	57	4	0.6-0.7 10-20	QUANTITY
fuelectenerg-6011	57	5	2012	DATE
fuelectenerg-6011	57	6	6	CARDINAL
fuelectenerg-6011	57	7	0.6-0.7 10-20	MONEY
fuelectenerg-6011	57	8	2013	DATE
fuelectenerg-6011	57	9	6	CARDINAL
fuelectenerg-6011	57	10	0.6-0.7 10-20	MONEY
fuelectenerg-6011	57	11	2014	DATE
fuelectenerg-6011	57	12	6	CARDINAL
fuelectenerg-6011	57	13	0.6-0.7 10	MONEY
fuelectenerg-6011	57	14	6	CARDINAL
fuelectenerg-6011	57	15	4 high-k 9-10	TIME
fuelectenerg-6011	57	16	4 high-k	QUANTITY
fuelectenerg-6011	57	17	12 4 high-k	QUANTITY
fuelectenerg-6011	57	18	4 high-k	QUANTITY
fuelectenerg-6011	57	19	159	CARDINAL
fuelectenerg-6011	58	1	the last few years	DATE
fuelectenerg-6011	58	2	si	ORG
fuelectenerg-6011	58	3	ge	ORG
fuelectenerg-6011	60	1	ge	ORG
fuelectenerg-6011	61	1	14	CARDINAL
fuelectenerg-6011	62	1	four	CARDINAL
fuelectenerg-6011	64	1	1	CARDINAL
fuelectenerg-6011	64	2	5	CARDINAL
fuelectenerg-6011	70	1	rta	GPE
fuelectenerg-6011	73	1	two	CARDINAL
fuelectenerg-6011	79	1	3	CARDINAL
fuelectenerg-6011	80	1	160	CARDINAL
fuelectenerg-6011	80	2	r. rajput	PERSON
fuelectenerg-6011	80	3	r. vaid si	PERSON
fuelectenerg-6011	80	4	sio2	ORG
fuelectenerg-6011	80	5	ipd	ORG
fuelectenerg-6011	80	6	ipd	ORG
fuelectenerg-6011	83	1	3	CARDINAL
fuelectenerg-6011	83	2	2	CARDINAL
fuelectenerg-6011	83	3	15	CARDINAL
fuelectenerg-6011	83	4	three	CARDINAL
fuelectenerg-6011	84	1	16	CARDINAL
fuelectenerg-6011	85	1	ag	ORG
fuelectenerg-6011	85	2	chungho lee et	PERSON
fuelectenerg-6011	86	1	al	PERSON
fuelectenerg-6011	87	1	17	CARDINAL
fuelectenerg-6011	87	2	2005	DATE
fuelectenerg-6011	89	1	first	ORDINAL
fuelectenerg-6011	89	2	yamazaki et al	PERSON
fuelectenerg-6011	90	1	18	CARDINAL
fuelectenerg-6011	90	2	19	CARDINAL
fuelectenerg-6011	91	1	20	CARDINAL
fuelectenerg-6011	94	1	al	PERSON
fuelectenerg-6011	95	1	22	CARDINAL
fuelectenerg-6011	95	2	2005	DATE
fuelectenerg-6011	95	3	hfo2	ORG
fuelectenerg-6011	95	4	161	CARDINAL
fuelectenerg-6011	96	1	jong jin lee	PERSON
fuelectenerg-6011	96	2	dim-lee kwong	PERSON
fuelectenerg-6011	97	1	23	CARDINAL
fuelectenerg-6011	97	2	2005	DATE
fuelectenerg-6011	97	3	nc	GPE
fuelectenerg-6011	97	4	hfo2	ORG
fuelectenerg-6011	98	1	4.5–4.6	CARDINAL
fuelectenerg-6011	99	1	24	CARDINAL
fuelectenerg-6011	100	1	nc	GPE
fuelectenerg-6011	100	2	hfo2	NORP
fuelectenerg-6011	100	3	5.1	CARDINAL
fuelectenerg-6011	101	1	hei wong	PERSON
fuelectenerg-6011	101	2	hiroshi iwai	PERSON
fuelectenerg-6011	101	3	2006	DATE
fuelectenerg-6011	101	4	25	CARDINAL
fuelectenerg-6011	101	5	two	CARDINAL
fuelectenerg-6011	101	6	about 7a	CARDINAL
fuelectenerg-6011	104	1	second	ORDINAL
fuelectenerg-6011	104	2	sio2	PERSON
fuelectenerg-6011	104	3	3.9-7.8	CARDINAL
fuelectenerg-6011	104	4	5.9–8.9	CARDINAL
fuelectenerg-6011	107	1	two	CARDINAL
fuelectenerg-6011	110	1	26	CARDINAL
fuelectenerg-6011	112	1	s. hwang et	PERSON
fuelectenerg-6011	113	1	al	PERSON
fuelectenerg-6011	114	1	30	CARDINAL
fuelectenerg-6011	114	2	2007	DATE
fuelectenerg-6011	116	1	yeh et.	PERSON
fuelectenerg-6011	117	1	al	PERSON
fuelectenerg-6011	118	1	31	CARDINAL
fuelectenerg-6011	118	2	2007	DATE
fuelectenerg-6011	120	1	hfo2	ORG
fuelectenerg-6011	120	2	sio2	ORG
fuelectenerg-6011	121	1	hfo2	NORP
fuelectenerg-6011	121	2	1.5	CARDINAL
fuelectenerg-6011	123	1	weihua guan	PERSON
fuelectenerg-6011	124	1	al	PERSON
fuelectenerg-6011	125	1	32	CARDINAL
fuelectenerg-6011	125	2	2007	DATE
fuelectenerg-6011	125	3	mnc	ORG
fuelectenerg-6011	126	1	3.6	CARDINAL
fuelectenerg-6011	126	2	10 years	DATE
fuelectenerg-6011	128	1	162	CARDINAL
fuelectenerg-6011	128	2	r. rajput	PERSON
fuelectenerg-6011	128	3	r. vaid	PERSON
fuelectenerg-6011	130	1	al	PERSON
fuelectenerg-6011	131	1	33	CARDINAL
fuelectenerg-6011	131	2	2007	DATE
fuelectenerg-6011	132	1	5.0	CARDINAL
fuelectenerg-6011	134	1	al	PERSON
fuelectenerg-6011	135	1	34	CARDINAL
fuelectenerg-6011	135	2	2007	DATE
fuelectenerg-6011	135	3	si/sio2/ni ncs/sio2	ORG
fuelectenerg-6011	136	1	3	CARDINAL
fuelectenerg-6011	136	2	5	CARDINAL
fuelectenerg-6011	136	3	10	CARDINAL
fuelectenerg-6011	136	4	1 s	CARDINAL
fuelectenerg-6011	137	1	byoungjun park	PERSON
fuelectenerg-6011	138	1	al	PERSON
fuelectenerg-6011	139	1	14	CARDINAL
fuelectenerg-6011	139	2	2008	DATE
fuelectenerg-6011	139	3	sio2	ORG
fuelectenerg-6011	140	1	4.3	CARDINAL
fuelectenerg-6011	140	2	tio2	GPE
fuelectenerg-6011	141	1	yingtao li	PERSON
fuelectenerg-6011	141	2	su liu	PERSON
fuelectenerg-6011	142	1	35	CARDINAL
fuelectenerg-6011	142	2	2009	DATE
fuelectenerg-6011	142	3	nc	GPE
fuelectenerg-6011	142	4	w~4.6ev	ORG
fuelectenerg-6011	142	5	au-nc	GPE
fuelectenerg-6011	143	1	3	CARDINAL
fuelectenerg-6011	143	2	ni henan	PERSON
fuelectenerg-6011	144	1	al	PERSON
fuelectenerg-6011	145	1	36	CARDINAL
fuelectenerg-6011	145	2	2009	DATE
fuelectenerg-6011	145	3	sio2	ORG
fuelectenerg-6011	147	1	37	CARDINAL
fuelectenerg-6011	148	1	zs	ORG
fuelectenerg-6011	148	2	j. horvath	PERSON
fuelectenerg-6011	149	1	38	CARDINAL
fuelectenerg-6011	149	2	2009	DATE
fuelectenerg-6011	149	3	sio2	ORG
fuelectenerg-6011	150	1	jeng hwa liao et	PERSON
fuelectenerg-6011	151	1	al	PERSON
fuelectenerg-6011	152	1	41	CARDINAL
fuelectenerg-6011	154	1	s. raghunathan et	PERSON
fuelectenerg-6011	155	1	al	PERSON
fuelectenerg-6011	156	1	11	CARDINAL
fuelectenerg-6011	156	2	2009	DATE
fuelectenerg-6011	156	3	three	CARDINAL
fuelectenerg-6011	158	1	jayanti et	PERSON
fuelectenerg-6011	159	1	al	PERSON
fuelectenerg-6011	160	1	12	CARDINAL
fuelectenerg-6011	160	2	2010	DATE
fuelectenerg-6011	161	1	163	CARDINAL
fuelectenerg-6011	161	2	ipd	ORG
fuelectenerg-6011	162	1	jang-sik lee	PERSON
fuelectenerg-6011	163	1	42	CARDINAL
fuelectenerg-6011	163	2	2010	DATE
fuelectenerg-6011	164	1	shiqian yang et	PERSON
fuelectenerg-6011	165	1	al	PERSON
fuelectenerg-6011	166	1	43	CARDINAL
fuelectenerg-6011	166	2	2010	DATE
fuelectenerg-6011	166	3	nc	GPE
fuelectenerg-6011	168	1	al	PERSON
fuelectenerg-6011	169	1	44	CARDINAL
fuelectenerg-6011	169	2	2010	DATE
fuelectenerg-6011	169	3	two	CARDINAL
fuelectenerg-6011	169	4	hfo2	ORG
fuelectenerg-6011	170	1	35	DATE
fuelectenerg-6011	173	1	al	PERSON
fuelectenerg-6011	174	1	45	CARDINAL
fuelectenerg-6011	174	2	2010	DATE
fuelectenerg-6011	174	3	10 2	CARDINAL
fuelectenerg-6011	174	4	10	CARDINAL
fuelectenerg-6011	175	1	larysa khomenkova	PERSON
fuelectenerg-6011	176	1	al	PERSON
fuelectenerg-6011	177	1	46	CARDINAL
fuelectenerg-6011	177	2	2011	DATE
fuelectenerg-6011	177	3	hfo2	NORP
fuelectenerg-6011	178	1	x. li	PERSON
fuelectenerg-6011	179	1	47	CARDINAL
fuelectenerg-6011	180	1	al.	PERSON
fuelectenerg-6011	181	1	2011	DATE
fuelectenerg-6011	181	2	hfo2	NORP
fuelectenerg-6011	181	3	tio2	GPE
fuelectenerg-6011	182	1	20	CARDINAL
fuelectenerg-6011	182	2	46/54	CARDINAL
fuelectenerg-6011	182	3	50	CARDINAL
fuelectenerg-6011	182	4	1.2	CARDINAL
fuelectenerg-6011	182	5	1	CARDINAL
fuelectenerg-6011	182	6	hfo2	ORG
fuelectenerg-6011	183	1	minseong yun	PERSON
fuelectenerg-6011	184	1	48	CARDINAL
fuelectenerg-6011	186	1	2012	DATE
fuelectenerg-6011	187	1	chih-ting lin et	PERSON
fuelectenerg-6011	188	1	al	PERSON
fuelectenerg-6011	189	1	49	CARDINAL
fuelectenerg-6011	189	2	2013	DATE
fuelectenerg-6011	190	1	700	CARDINAL
fuelectenerg-6011	190	2	ncs	GPE
fuelectenerg-6011	191	1	jun-hyuk	PERSON
fuelectenerg-6011	192	1	al	PERSON
fuelectenerg-6011	193	1	50	CARDINAL
fuelectenerg-6011	193	2	2013	DATE
fuelectenerg-6011	193	3	hfo2	ORG
fuelectenerg-6011	193	4	sio2	ORG
fuelectenerg-6011	195	1	wenchieh shih et	PERSON
fuelectenerg-6011	196	1	al	PERSON
fuelectenerg-6011	197	1	51	CARDINAL
fuelectenerg-6011	197	2	2013	DATE
fuelectenerg-6011	197	3	al/y2o3	FAC
fuelectenerg-6011	198	1	chen et	PERSON
fuelectenerg-6011	199	1	al	PERSON
fuelectenerg-6011	200	1	52	CARDINAL
fuelectenerg-6011	200	2	2014	DATE
fuelectenerg-6011	200	3	15	CARDINAL
fuelectenerg-6011	200	4	150	CARDINAL
fuelectenerg-6011	200	5	si/sio2-4.5	ORG
fuelectenerg-6011	203	1	4	CARDINAL
fuelectenerg-6011	203	2	53	CARDINAL
fuelectenerg-6011	204	1	164	CARDINAL
fuelectenerg-6011	204	2	r. rajput	PERSON
fuelectenerg-6011	204	3	r. vaid	GPE
fuelectenerg-6011	204	4	54	CARDINAL
fuelectenerg-6011	205	1	hfo2	ORG
fuelectenerg-6011	206	1	chengyuan yan	PERSON
fuelectenerg-6011	207	1	al	PERSON
fuelectenerg-6011	208	1	55	CARDINAL
fuelectenerg-6011	208	2	2019	DATE
fuelectenerg-6011	210	1	s. wang	PERSON
fuelectenerg-6011	211	1	al	PERSON
fuelectenerg-6011	212	1	56	CARDINAL
fuelectenerg-6011	212	2	2019	DATE
fuelectenerg-6011	212	3	mos2	PRODUCT
fuelectenerg-6011	213	1	~10 -13	ORG
fuelectenerg-6011	214	1	3	CARDINAL
fuelectenerg-6011	214	2	5.35	CARDINAL
fuelectenerg-6011	214	3	5.1	CARDINAL
fuelectenerg-6011	214	4	4.0 ti 4.35 cr	QUANTITY
fuelectenerg-6011	214	5	4.5	CARDINAL
fuelectenerg-6011	214	6	5.0	CARDINAL
fuelectenerg-6011	214	7	4.65	CARDINAL
fuelectenerg-6011	214	8	3.68	CARDINAL
fuelectenerg-6011	214	9	nb	ORG
fuelectenerg-6011	214	10	4.3	CARDINAL
fuelectenerg-6011	214	11	4	CARDINAL
fuelectenerg-6011	214	12	53	CARDINAL
fuelectenerg-6011	214	13	3.2 3.9	CARDINAL
fuelectenerg-6011	214	14	5.1	CARDINAL
fuelectenerg-6011	214	15	5.1-8.9 2-3.2 3.9-7.1	QUANTITY
fuelectenerg-6011	214	16	8.7	CARDINAL
fuelectenerg-6011	214	17	5.7 1.5 25 monoclinic	QUANTITY
fuelectenerg-6011	214	18	7.8	CARDINAL
fuelectenerg-6011	214	19	1.4 25 monoclinic	QUANTITY
fuelectenerg-6011	214	20	1.2 80	CARDINAL
fuelectenerg-6011	214	21	4.5	CARDINAL
fuelectenerg-6011	214	22	5.6 2.3 15 cubic la2o3 4.3	QUANTITY
fuelectenerg-6011	214	23	165	CARDINAL
fuelectenerg-6011	214	24	the past few years	DATE
fuelectenerg-6011	216	1	ipd	ORG
fuelectenerg-6011	218	1	nc	GPE
fuelectenerg-6011	221	1	nc	GPE
fuelectenerg-6011	225	1	renu	ORG
fuelectenerg-6011	226	1	rakesh vaid	PERSON
fuelectenerg-6011	228	1	1	CARDINAL
fuelectenerg-6011	228	2	r. bez	PERSON
fuelectenerg-6011	228	3	e. camerlenghi	PERSON
fuelectenerg-6011	228	4	a. modelli	PERSON
fuelectenerg-6011	228	5	a. visconti	PERSON
fuelectenerg-6011	228	6	2003	DATE
fuelectenerg-6011	228	7	91	CARDINAL
fuelectenerg-6011	229	1	489–502	CARDINAL
fuelectenerg-6011	230	1	2	CARDINAL
fuelectenerg-6011	231	1	3	CARDINAL
fuelectenerg-6011	231	2	r. garg	PERSON
fuelectenerg-6011	231	3	d. misra	ORG
fuelectenerg-6011	232	1	p. k. swain	PERSON
fuelectenerg-6011	232	2	ge mos	ORG
fuelectenerg-6011	232	3	hfo2	ORG
fuelectenerg-6011	233	1	153	CARDINAL
fuelectenerg-6011	234	1	2006	DATE
fuelectenerg-6011	235	1	4	CARDINAL
fuelectenerg-6011	235	2	a. g. khairnar	PERSON
fuelectenerg-6011	235	3	a. m. mahajan	PERSON
fuelectenerg-6011	235	4	sci.	ORG
fuelectenerg-6011	235	5	15	CARDINAL
fuelectenerg-6011	236	1	24–28, 2013	DATE
fuelectenerg-6011	237	1	5	CARDINAL
fuelectenerg-6011	237	2	h. s. kim	PERSON
fuelectenerg-6011	237	3	hfo2	ORG
fuelectenerg-6011	237	4	ph.d	ORG
fuelectenerg-6011	238	1	the university of texas	ORG
fuelectenerg-6011	238	2	austin	GPE
fuelectenerg-6011	238	3	2008	DATE
fuelectenerg-6011	239	1	6	CARDINAL
fuelectenerg-6011	239	2	j. chandra	PERSON
fuelectenerg-6011	239	3	m. jeong	PERSON
fuelectenerg-6011	239	4	y. c. park	PERSON
fuelectenerg-6011	239	5	j. w. yoon	PERSON
fuelectenerg-6011	239	6	c. j. choi	PERSON
fuelectenerg-6011	239	7	ge metal	ORG
fuelectenerg-6011	239	8	hfo2	NORP
fuelectenerg-6011	240	1	trans.	PERSON
fuelectenerg-6011	241	1	52	DATE
fuelectenerg-6011	242	1	118–123, 2011	DATE
fuelectenerg-6011	243	1	7	CARDINAL
fuelectenerg-6011	243	2	m. saitoh	PERSON
fuelectenerg-6011	243	3	e. nagata	PERSON
fuelectenerg-6011	243	4	t. hiramoto	PERSON
fuelectenerg-6011	243	5	2002	DATE
fuelectenerg-6011	244	1	181–184	CARDINAL
fuelectenerg-6011	245	1	8	CARDINAL
fuelectenerg-6011	245	2	n. konofaos	PERSON
fuelectenerg-6011	245	3	mos vlsi electronics	ORG
fuelectenerg-6011	245	4	microelectron	ORG
fuelectenerg-6011	246	1	j.	PERSON
fuelectenerg-6011	246	2	35	DATE
fuelectenerg-6011	247	1	421–425, 2004	DATE
fuelectenerg-6011	248	1	166	CARDINAL
fuelectenerg-6011	248	2	r. rajput	PERSON
fuelectenerg-6011	248	3	r. vaid	PERSON
fuelectenerg-6011	249	1	9	CARDINAL
fuelectenerg-6011	249	2	i. fainer	PERSON
fuelectenerg-6011	249	3	m. l. kosinova	PERSON
fuelectenerg-6011	249	4	a. e. a. macimovsky	PERSON
fuelectenerg-6011	249	5	m. rumyantsev	PERSON
fuelectenerg-6011	249	6	f. a. kuznetsov	PERSON
fuelectenerg-6011	249	7	v. g. kesler	PERSON
fuelectenerg-6011	249	8	v. v. kirienko	PERSON
fuelectenerg-6011	249	9	icp-cvd	PERSON
fuelectenerg-6011	250	1	instrum	PERSON
fuelectenerg-6011	256	1	543	CARDINAL
fuelectenerg-6011	257	1	134–138, 2005	DATE
fuelectenerg-6011	258	1	10	CARDINAL
fuelectenerg-6011	258	2	s. n. keeney	PERSON
fuelectenerg-6011	258	3	2004	DATE
fuelectenerg-6011	258	4	04	DATE
fuelectenerg-6011	259	1	151–158	CARDINAL
fuelectenerg-6011	260	1	11	CARDINAL
fuelectenerg-6011	260	2	t. krishnamohan	GPE
fuelectenerg-6011	260	3	k. parat	PERSON
fuelectenerg-6011	260	4	k. saraswat	PERSON
fuelectenerg-6011	260	5	the ieee international electron devices meeting	ORG
fuelectenerg-6011	260	6	baltimore	GPE
fuelectenerg-6011	260	7	md	GPE
fuelectenerg-6011	260	8	7-9	DATE
fuelectenerg-6011	260	9	december	DATE
fuelectenerg-6011	260	10	2009	DATE
fuelectenerg-6011	261	1	34.1.1–3.4.1.4	CARDINAL
fuelectenerg-6011	262	1	12	CARDINAL
fuelectenerg-6011	262	2	s. jayanti	PERSON
fuelectenerg-6011	262	3	x. yang	PERSON
fuelectenerg-6011	262	4	r. suri	PERSON
fuelectenerg-6011	262	5	v. misra	ORG
fuelectenerg-6011	262	6	2010	DATE
fuelectenerg-6011	263	1	5.3.1–5.3.4	CARDINAL
fuelectenerg-6011	263	2	13	CARDINAL
fuelectenerg-6011	263	3	j. brewer	PERSON
fuelectenerg-6011	263	4	m. gill	PERSON
fuelectenerg-6011	263	5	piscataway	GPE
fuelectenerg-6011	263	6	nj, usa, 2008	ORG
fuelectenerg-6011	264	1	14	CARDINAL
fuelectenerg-6011	264	2	k. cho	PERSON
fuelectenerg-6011	264	3	j. yun	PERSON
fuelectenerg-6011	264	4	y. s. koo	PERSON
fuelectenerg-6011	264	5	j. h. lee	PERSON
fuelectenerg-6011	264	6	s. kim	PERSON
fuelectenerg-6011	264	7	j.	PERSON
fuelectenerg-6011	264	8	nanosci	GPE
fuelectenerg-6011	265	1	nanotech	ORG
fuelectenerg-6011	265	2	8	CARDINAL
fuelectenerg-6011	266	1	1904–1908, 2008	DATE
fuelectenerg-6011	267	1	15	CARDINAL
fuelectenerg-6011	267	2	c. lee	PERSON
fuelectenerg-6011	267	3	j. meteer	PERSON
fuelectenerg-6011	267	4	v. narayanan	PERSON
fuelectenerg-6011	267	5	e. c. kan	PERSON
fuelectenerg-6011	269	1	34	CARDINAL
fuelectenerg-6011	270	1	1–11, 2005	DATE
fuelectenerg-6011	271	1	16	CARDINAL
fuelectenerg-6011	271	2	z. liu	PERSON
fuelectenerg-6011	271	3	c. lee	PERSON
fuelectenerg-6011	271	4	v. narayanan	PERSON
fuelectenerg-6011	271	5	g. pei	PERSON
fuelectenerg-6011	271	6	kan	ORG
fuelectenerg-6011	272	1	49	DATE
fuelectenerg-6011	273	1	1606–1613, 2002	DATE
fuelectenerg-6011	274	1	17	CARDINAL
fuelectenerg-6011	274	2	c. lee	PERSON
fuelectenerg-6011	274	3	t. h. hou	PERSON
fuelectenerg-6011	274	4	e. c. c. kan	PERSON
fuelectenerg-6011	275	1	52	DATE
fuelectenerg-6011	275	2	2697–2702, 2005	DATE
fuelectenerg-6011	276	1	18	CARDINAL
fuelectenerg-6011	276	2	s. yamazaki	PERSON
fuelectenerg-6011	276	3	k. hatakeyama	PERSON
fuelectenerg-6011	276	4	i. kagawa	PERSON
fuelectenerg-6011	276	5	y. yamashita	ORG
fuelectenerg-6011	276	6	1973	DATE
fuelectenerg-6011	277	1	355–358	CARDINAL
fuelectenerg-6011	278	1	19	CARDINAL
fuelectenerg-6011	278	2	s. yamazaki	PERSON
fuelectenerg-6011	278	3	64	DATE
fuelectenerg-6011	279	1	1585–1589, 1985	DATE
fuelectenerg-6011	280	1	20	CARDINAL
fuelectenerg-6011	280	2	r. f. steimle	PERSON
fuelectenerg-6011	280	3	m. sadd	PERSON
fuelectenerg-6011	280	4	r. muralidhar	PERSON
fuelectenerg-6011	280	5	r. rao	PERSON
fuelectenerg-6011	280	6	b. hradsky	PERSON
fuelectenerg-6011	280	7	s. straub	PERSON
fuelectenerg-6011	280	8	b. e. white jr.	PERSON
fuelectenerg-6011	280	9	nanotechn	PERSON
fuelectenerg-6011	281	1	2	CARDINAL
fuelectenerg-6011	282	1	335–340, 2003	DATE
fuelectenerg-6011	283	1	21	CARDINAL
fuelectenerg-6011	283	2	r. f. steimle	PERSON
fuelectenerg-6011	283	3	r. a. rao	PERSON
fuelectenerg-6011	283	4	b. hradsky	PERSON
fuelectenerg-6011	283	5	r. muralidhar	PERSON
fuelectenerg-6011	283	6	m. sadd	PERSON
fuelectenerg-6011	283	7	m. ramon	PERSON
fuelectenerg-6011	283	8	s. straub	PERSON
fuelectenerg-6011	283	9	s. bagchi	PERSON
fuelectenerg-6011	283	10	x. d. wang	PERSON
fuelectenerg-6011	283	11	j. hooker	ORG
fuelectenerg-6011	283	12	b. e. white jr.	PERSON
fuelectenerg-6011	283	13	2003	DATE
fuelectenerg-6011	284	1	848–849	CARDINAL
fuelectenerg-6011	285	1	22	CARDINAL
fuelectenerg-6011	285	2	k. giannakopoulos	PERSON
fuelectenerg-6011	285	3	a. travlos	PERSON
fuelectenerg-6011	285	4	j. of phys.	ORG
fuelectenerg-6011	285	5	10	CARDINAL
fuelectenerg-6011	286	1	53–56, 2005	DATE
fuelectenerg-6011	287	1	23	CARDINAL
fuelectenerg-6011	287	2	j. j. lee	PERSON
fuelectenerg-6011	287	3	d. l. kwong	PERSON
fuelectenerg-6011	288	1	52	DATE
fuelectenerg-6011	289	1	507–511, 2005	DATE
fuelectenerg-6011	290	1	24	CARDINAL
fuelectenerg-6011	290	2	s. m. sze	PERSON
fuelectenerg-6011	291	1	new york	GPE
fuelectenerg-6011	291	2	wiley	ORG
fuelectenerg-6011	291	3	1981	DATE
fuelectenerg-6011	291	4	chapter 7	LAW
fuelectenerg-6011	292	1	25	CARDINAL
fuelectenerg-6011	292	2	h. wong	PERSON
fuelectenerg-6011	292	3	h. iwai	PERSON
fuelectenerg-6011	292	4	microelectron	ORG
fuelectenerg-6011	293	1	eng	GPE
fuelectenerg-6011	293	2	83	DATE
fuelectenerg-6011	294	1	1867–1904, 2006	DATE
fuelectenerg-6011	295	1	26	CARDINAL
fuelectenerg-6011	295	2	h. wong	PERSON
fuelectenerg-6011	295	3	b. l. yang	PERSON
fuelectenerg-6011	295	4	y.c. cheng	PERSON
fuelectenerg-6011	297	1	sci.	ORG
fuelectenerg-6011	297	2	72	DATE
fuelectenerg-6011	298	1	49–54, 1993	DATE
fuelectenerg-6011	299	1	27	CARDINAL
fuelectenerg-6011	299	2	e. cartier	PERSON
fuelectenerg-6011	299	3	j. h. stathis	PERSON
fuelectenerg-6011	299	4	microelectron	ORG
fuelectenerg-6011	300	1	eng	GPE
fuelectenerg-6011	300	2	28	CARDINAL
fuelectenerg-6011	300	3	3–10, 1995	DATE
fuelectenerg-6011	301	1	28	CARDINAL
fuelectenerg-6011	301	2	j. t. yount	PERSON
fuelectenerg-6011	301	3	p. m. lenahan	PERSON
fuelectenerg-6011	301	4	j. t. krik	PERSON
fuelectenerg-6011	301	5	nh3	PRODUCT
fuelectenerg-6011	302	1	76	DATE
fuelectenerg-6011	303	1	1754–1758, 1994	DATE
fuelectenerg-6011	304	1	29	CARDINAL
fuelectenerg-6011	304	2	i. j. r. baumvol	PERSON
fuelectenerg-6011	304	3	f. c. stedile	PERSON
fuelectenerg-6011	304	4	j. j. ganem	PERSON
fuelectenerg-6011	304	5	i. trimaille	PERSON
fuelectenerg-6011	304	6	s. rigo	PERSON
fuelectenerg-6011	304	7	sio2	ORG
fuelectenerg-6011	306	1	143	CARDINAL
fuelectenerg-6011	307	1	1426–1434, 1996	DATE
fuelectenerg-6011	308	1	30	CARDINAL
fuelectenerg-6011	308	2	s. hwang	PERSON
fuelectenerg-6011	308	3	s. jung	PERSON
fuelectenerg-6011	308	4	k. s. jang	PERSON
fuelectenerg-6011	308	5	j. i. lee	PERSON
fuelectenerg-6011	308	6	h. park	GPE
fuelectenerg-6011	308	7	s. k. dhungel	PERSON
fuelectenerg-6011	308	8	j. yi	PERSON
fuelectenerg-6011	308	9	j. of	PERSON
fuelectenerg-6011	308	10	korean	NORP
fuelectenerg-6011	311	1	51	DATE
fuelectenerg-6011	312	1	1096–1099, 2007	DATE
fuelectenerg-6011	313	1	31	CARDINAL
fuelectenerg-6011	313	2	yeh	GPE
fuelectenerg-6011	313	3	l.j. chen	PERSON
fuelectenerg-6011	313	4	p.t. liu	PERSON
fuelectenerg-6011	313	5	wang	PERSON
fuelectenerg-6011	313	6	t.c. chang	PERSON
fuelectenerg-6011	313	7	electrochimica acta	ORG
fuelectenerg-6011	313	8	52	DATE
fuelectenerg-6011	313	9	2920–2926, 2007	DATE
fuelectenerg-6011	314	1	32	CARDINAL
fuelectenerg-6011	314	2	w. guan	PERSON
fuelectenerg-6011	314	3	s. long	PERSON
fuelectenerg-6011	314	4	r. jia	PERSON
fuelectenerg-6011	314	5	q. liu	PERSON
fuelectenerg-6011	314	6	y. hu	PERSON
fuelectenerg-6011	314	7	q. wang	PERSON
fuelectenerg-6011	314	8	m. liu	PERSON
fuelectenerg-6011	314	9	2007	DATE
fuelectenerg-6011	315	1	141	CARDINAL
fuelectenerg-6011	316	1	33	CARDINAL
fuelectenerg-6011	316	2	w. guan	PERSON
fuelectenerg-6011	316	3	s. long	PERSON
fuelectenerg-6011	316	4	m. liu	PERSON
fuelectenerg-6011	316	5	z. li	PERSON
fuelectenerg-6011	316	6	y. hu	PERSON
fuelectenerg-6011	316	7	qi liu	PERSON
fuelectenerg-6011	316	8	j. of phys	ORG
fuelectenerg-6011	318	1	40	DATE
fuelectenerg-6011	319	1	2754–2758, 2007	DATE
fuelectenerg-6011	320	1	34	CARDINAL
fuelectenerg-6011	320	2	j. y. choi	PERSON
fuelectenerg-6011	320	3	e. k. lee	PERSON
fuelectenerg-6011	320	4	y. s. min	PERSON
fuelectenerg-6011	320	5	j. b. park	PERSON
fuelectenerg-6011	320	6	j. of	PERSON
fuelectenerg-6011	320	7	korean	NORP
fuelectenerg-6011	322	1	50	CARDINAL
fuelectenerg-6011	323	1	49–52	ORDINAL
fuelectenerg-6011	323	2	2007	DATE
fuelectenerg-6011	324	1	167	CARDINAL
fuelectenerg-6011	324	2	35	CARDINAL
fuelectenerg-6011	324	3	y. li	PERSON
fuelectenerg-6011	324	4	s. liu	PERSON
fuelectenerg-6011	324	5	40	DATE
fuelectenerg-6011	325	1	92–94, 2009	DATE
fuelectenerg-6011	326	1	36	CARDINAL
fuelectenerg-6011	326	2	n. henan	PERSON
fuelectenerg-6011	326	3	w. liangcai	PERSON
fuelectenerg-6011	326	4	s. zhitang	PERSON
fuelectenerg-6011	326	5	h. chun	PERSON
fuelectenerg-6011	326	6	30	CARDINAL
fuelectenerg-6011	326	7	114003(1–5	CARDINAL
fuelectenerg-6011	326	8	2009	DATE
fuelectenerg-6011	327	1	37	CARDINAL
fuelectenerg-6011	327	2	c. lee	PERSON
fuelectenerg-6011	327	3	a. g. seetharam	PERSON
fuelectenerg-6011	327	4	e. c. kan	PERSON
fuelectenerg-6011	327	5	the iedm technical digest	ORG
fuelectenerg-6011	327	6	2003	DATE
fuelectenerg-6011	327	7	557	CARDINAL
fuelectenerg-6011	329	1	38	CARDINAL
fuelectenerg-6011	329	2	z. j. horvath	PERSON
fuelectenerg-6011	329	3	sci.	PERSON
fuelectenerg-6011	329	4	609	CARDINAL
fuelectenerg-6011	330	1	1–9, 2009	DATE
fuelectenerg-6011	331	1	39	CARDINAL
fuelectenerg-6011	331	2	z. j. horvath	PERSON
fuelectenerg-6011	331	3	t. jaszi	GPE
fuelectenerg-6011	331	4	a.e.	GPE
fuelectenerg-6011	331	5	l. dobos	PERSON
fuelectenerg-6011	331	6	b. pecz	PERSON
fuelectenerg-6011	331	7	l. toth	PERSON
fuelectenerg-6011	331	8	p. szollosi	PERSON
fuelectenerg-6011	331	9	k. nagy	PERSON
fuelectenerg-6011	331	10	j. of nanosci	PERSON
fuelectenerg-6011	331	11	nanotech	ORG
fuelectenerg-6011	331	12	8	CARDINAL
fuelectenerg-6011	332	1	812–817, 2008	DATE
fuelectenerg-6011	333	1	40	CARDINAL
fuelectenerg-6011	333	2	z. j. horvath	PERSON
fuelectenerg-6011	333	3	t. jaszi	GPE
fuelectenerg-6011	333	4	a.e.	GPE
fuelectenerg-6011	333	5	l. dobos	PERSON
fuelectenerg-6011	333	6	b. pecz	PERSON
fuelectenerg-6011	333	7	l. toth	PERSON
fuelectenerg-6011	336	1	38	DATE
fuelectenerg-6011	337	1	2007	DATE
fuelectenerg-6011	338	1	41	CARDINAL
fuelectenerg-6011	338	2	j. h. liao	PERSON
fuelectenerg-6011	338	3	j. y. hsieh	PERSON
fuelectenerg-6011	338	4	h. j. lin	PERSON
fuelectenerg-6011	338	5	w. y. tang	PERSON
fuelectenerg-6011	338	6	c. l. chiang	PERSON
fuelectenerg-6011	338	7	y. s. lo	PERSON
fuelectenerg-6011	338	8	t. b. wu	PERSON
fuelectenerg-6011	338	9	l. w. yang	PERSON
fuelectenerg-6011	338	10	t. yang	GPE
fuelectenerg-6011	338	11	k. c. chen	PERSON
fuelectenerg-6011	338	12	c. y. lu	PERSON
fuelectenerg-6011	338	13	j. of phys	ORG
fuelectenerg-6011	340	1	42	DATE
fuelectenerg-6011	341	1	175102(1-7	DATE
fuelectenerg-6011	341	2	2009	DATE
fuelectenerg-6011	342	1	42	CARDINAL
fuelectenerg-6011	342	2	j. s. lee	PERSON
fuelectenerg-6011	342	3	43	DATE
fuelectenerg-6011	343	1	189–199, 2010	DATE
fuelectenerg-6011	344	1	43	CARDINAL
fuelectenerg-6011	344	2	s. yang	PERSON
fuelectenerg-6011	344	3	q. wang	PERSON
fuelectenerg-6011	344	4	m. zhang	PERSON
fuelectenerg-6011	344	5	s. long	PERSON
fuelectenerg-6011	344	6	j. liu	PERSON
fuelectenerg-6011	344	7	m. liu	PERSON
fuelectenerg-6011	344	8	sio2	ORG
fuelectenerg-6011	344	9	21	DATE
fuelectenerg-6011	345	1	245201–245205, 2010	DATE
fuelectenerg-6011	346	1	44	CARDINAL
fuelectenerg-6011	346	2	b. meyler	PERSON
fuelectenerg-6011	346	3	s. yofis	PERSON
fuelectenerg-6011	346	4	j. salzman	PERSON
fuelectenerg-6011	346	5	m. garbrecht	PERSON
fuelectenerg-6011	346	6	t. cohen-hyams	PERSON
fuelectenerg-6011	346	7	w. d. kaplan	PERSON
fuelectenerg-6011	346	8	g. eisenstein	PERSON
fuelectenerg-6011	346	9	eisenstein g.	PERSON
fuelectenerg-6011	347	1	157	CARDINAL
fuelectenerg-6011	348	1	2010	DATE
fuelectenerg-6011	349	1	45	CARDINAL
fuelectenerg-6011	349	2	d. belhachemi	PERSON
fuelectenerg-6011	349	3	j. p. colonna	PERSON
fuelectenerg-6011	349	4	s. minoret	PERSON
fuelectenerg-6011	349	5	p. brianceau	PERSON
fuelectenerg-6011	349	6	d. lafond	GPE
fuelectenerg-6011	349	7	g. molas	PERSON
fuelectenerg-6011	349	8	e. jalaguier	PERSON
fuelectenerg-6011	349	9	a. beaurain	PERSON
fuelectenerg-6011	349	10	b. de salvo	PERSON
fuelectenerg-6011	351	1	lett.	PERSON
fuelectenerg-6011	352	1	97	CARDINAL
fuelectenerg-6011	353	1	152112(1–3	CARDINAL
fuelectenerg-6011	353	2	2010	DATE
fuelectenerg-6011	354	1	46	CARDINAL
fuelectenerg-6011	354	2	l. khomenkova	PERSON
fuelectenerg-6011	354	3	b. s. sahu	PERSON
fuelectenerg-6011	354	4	a. slaoui	PERSON
fuelectenerg-6011	354	5	f. gourbilleau	PERSON
fuelectenerg-6011	355	1	lett.	PERSON
fuelectenerg-6011	356	1	172	CARDINAL
fuelectenerg-6011	357	1	1–8, 2011	DATE
fuelectenerg-6011	358	1	47	CARDINAL
fuelectenerg-6011	358	2	x. li	PERSON
fuelectenerg-6011	358	3	x. f. chen	PERSON
fuelectenerg-6011	358	4	w. ren	PERSON
fuelectenerg-6011	358	5	p. shi	PERSON
fuelectenerg-6011	358	6	x. q. wu	PERSON
fuelectenerg-6011	358	7	o. k. tan	PERSON
fuelectenerg-6011	358	8	w. g. zhu	PERSON
fuelectenerg-6011	358	9	410	CARDINAL
fuelectenerg-6011	359	1	129–136, 2011	DATE
fuelectenerg-6011	360	1	48	CARDINAL
fuelectenerg-6011	360	2	m. yun	PERSON
fuelectenerg-6011	360	3	s. gangopadhyay	PERSON
fuelectenerg-6011	360	4	j.	PERSON
fuelectenerg-6011	362	1	159	CARDINAL
fuelectenerg-6011	363	1	2012	DATE
fuelectenerg-6011	364	1	49	CARDINAL
fuelectenerg-6011	364	2	c. t. lin	PERSON
fuelectenerg-6011	364	3	j. c. wang	PERSON
fuelectenerg-6011	364	4	w. huang	PERSON
fuelectenerg-6011	364	5	y. y. chen	PERSON
fuelectenerg-6011	364	6	l. c. chang	PERSON
fuelectenerg-6011	364	7	japanese	NORP
fuelectenerg-6011	365	1	52	DATE
fuelectenerg-6011	365	2	2013	DATE
fuelectenerg-6011	366	1	50	CARDINAL
fuelectenerg-6011	366	2	j. seo	PERSON
fuelectenerg-6011	366	3	j. y. kim	PERSON
fuelectenerg-6011	366	4	y. b. kim	PERSON
fuelectenerg-6011	366	5	d. w. kim	PERSON
fuelectenerg-6011	366	6	h. kim	PERSON
fuelectenerg-6011	366	7	h. jo	PERSON
fuelectenerg-6011	366	8	d. k. choi	PERSON
fuelectenerg-6011	366	9	microelectron	ORG
fuelectenerg-6011	367	1	53	DATE
fuelectenerg-6011	368	1	528–532	CARDINAL
fuelectenerg-6011	368	2	2013	DATE
fuelectenerg-6011	369	1	51	CARDINAL
fuelectenerg-6011	369	2	w. c. shih	PERSON
fuelectenerg-6011	369	3	c. h. cheng	PERSON
fuelectenerg-6011	369	4	j. y. m. lee	PERSON
fuelectenerg-6011	369	5	f. c. chiu	PERSON
fuelectenerg-6011	370	1	sci	PERSON
fuelectenerg-6011	370	2	eng	GPE
fuelectenerg-6011	370	3	2013	DATE
fuelectenerg-6011	371	1	52	CARDINAL
fuelectenerg-6011	371	2	g. chen	PERSON
fuelectenerg-6011	371	3	z. huo	PERSON
fuelectenerg-6011	371	4	l. jin	PERSON
fuelectenerg-6011	371	5	han	NORP
fuelectenerg-6011	371	6	x. li	PERSON
fuelectenerg-6011	371	7	su liu	PERSON
fuelectenerg-6011	371	8	m. liu	PERSON
fuelectenerg-6011	371	9	sio2/hfo2	ORG
fuelectenerg-6011	371	10	35	DATE
fuelectenerg-6011	372	1	744–746, 2014	DATE
fuelectenerg-6011	373	1	53	CARDINAL
fuelectenerg-6011	373	2	g. d. wilk	PERSON
fuelectenerg-6011	373	3	r. m. wallace	PERSON
fuelectenerg-6011	373	4	j. m. anthony	PERSON
fuelectenerg-6011	374	1	89	CARDINAL
fuelectenerg-6011	374	2	5243–5255, 2001	DATE
fuelectenerg-6011	375	1	54	CARDINAL
fuelectenerg-6011	375	2	c. zhao	PERSON
fuelectenerg-6011	375	3	c. z. zhao	PERSON
fuelectenerg-6011	375	4	s. taylor	PERSON
fuelectenerg-6011	375	5	r. chalker	PERSON
fuelectenerg-6011	375	6	32	CARDINAL
fuelectenerg-6011	376	1	7	CARDINAL
fuelectenerg-6011	377	1	5117–5145, 2014	DATE
fuelectenerg-6011	378	1	55	CARDINAL
fuelectenerg-6011	378	2	c. yan	PERSON
fuelectenerg-6011	378	3	j. wen	PERSON
fuelectenerg-6011	378	4	p. lin	PERSON
fuelectenerg-6011	378	5	z. sun	PERSON
fuelectenerg-6011	378	6	pp.1804156	GPE
fuelectenerg-6011	378	7	2019	DATE
fuelectenerg-6011	379	1	56	CARDINAL
fuelectenerg-6011	379	2	s. wang	PERSON
fuelectenerg-6011	379	3	j. tang	PERSON
fuelectenerg-6011	379	4	x. lu	PERSON
fuelectenerg-6011	379	5	c. shen	PERSON
fuelectenerg-6011	379	6	h. yu	PERSON
fuelectenerg-6011	379	7	l. du	PERSON
fuelectenerg-6011	379	8	j. li	PERSON
fuelectenerg-6011	379	9	r. yang	PERSON
fuelectenerg-6011	379	10	d. shi	PERSON
fuelectenerg-6011	379	11	g. zhang	PERSON
fuelectenerg-6011	380	1	5	CARDINAL
fuelectenerg-6011	381	1	1800726	DATE
fuelectenerg-6011	381	2	2019	DATE