id	sid	eid	entity	type
fuelectenerg-671	1	1	28	CARDINAL
fuelectenerg-671	2	1	457 464	CARDINAL
fuelectenerg-671	2	2	10.2298	CARDINAL
fuelectenerg-671	2	3	two	CARDINAL
fuelectenerg-671	2	4	aaron m. collins	PERSON
fuelectenerg-671	2	5	yue pan	PERSON
fuelectenerg-671	2	6	anthony s. holland school of science	PERSON
fuelectenerg-671	2	7	australia	GPE
fuelectenerg-671	3	1	three	CARDINAL
fuelectenerg-671	3	2	3-d	QUANTITY
fuelectenerg-671	3	3	two	CARDINAL
fuelectenerg-671	5	1	200	CARDINAL
fuelectenerg-671	5	2	ge	ORG
fuelectenerg-671	5	3	200	CARDINAL
fuelectenerg-671	5	4	4h	CARDINAL
fuelectenerg-671	6	1	2.3-27	CARDINAL
fuelectenerg-671	6	2	6 ω·cm2	QUANTITY
fuelectenerg-671	6	3	1.3-2.4	CARDINAL
fuelectenerg-671	6	4	3 ω·cm2	QUANTITY
fuelectenerg-671	8	1	1.	CARDINAL
fuelectenerg-671	9	1	two	CARDINAL
fuelectenerg-671	11	1	1-6	CARDINAL
fuelectenerg-671	12	1	tlm	ORG
fuelectenerg-671	13	1	tlm	PERSON
fuelectenerg-671	13	2	two	CARDINAL
fuelectenerg-671	13	3	2-d	QUANTITY
fuelectenerg-671	14	1	tlm	PERSON
fuelectenerg-671	15	1	3-d	QUANTITY
fuelectenerg-671	16	1	3-d	QUANTITY
fuelectenerg-671	16	2	8	CARDINAL
fuelectenerg-671	17	1	3-d	QUANTITY
fuelectenerg-671	17	2	two	CARDINAL
fuelectenerg-671	17	3	three	CARDINAL
fuelectenerg-671	18	1	9	CARDINAL
fuelectenerg-671	19	1	december 2, 2014	DATE
fuelectenerg-671	19	2	february 10, 2015	DATE
fuelectenerg-671	19	3	yue pan	PERSON
fuelectenerg-671	19	4	australia	GPE
fuelectenerg-671	19	5	458	CARDINAL
fuelectenerg-671	19	6	a. m. collins	PERSON
fuelectenerg-671	19	7	y. pan	PERSON
fuelectenerg-671	19	8	a. s. holland	PERSON
fuelectenerg-671	21	1	200	CARDINAL
fuelectenerg-671	21	2	ge	ORG
fuelectenerg-671	21	3	200	CARDINAL
fuelectenerg-671	21	4	4h	CARDINAL
fuelectenerg-671	21	5	2.3	CARDINAL
fuelectenerg-671	21	6	1.3-2.4)×10	CARDINAL
fuelectenerg-671	22	1	2	CARDINAL
fuelectenerg-671	22	2	berger	PERSON
fuelectenerg-671	22	3	10	CARDINAL
fuelectenerg-671	22	4	η	PERSON
fuelectenerg-671	22	5	3-d	QUANTITY
fuelectenerg-671	23	1	1	CARDINAL
fuelectenerg-671	23	2	η ≤ 1	FAC
fuelectenerg-671	23	3	3-d	QUANTITY
fuelectenerg-671	23	4	2-d	QUANTITY
fuelectenerg-671	25	1	1	CARDINAL
fuelectenerg-671	25	2	3-d	QUANTITY
fuelectenerg-671	25	3	η ≤ 1	FAC
fuelectenerg-671	26	1	3-d	QUANTITY
fuelectenerg-671	27	1	1	CARDINAL
fuelectenerg-671	30	1	mesa	ORG
fuelectenerg-671	31	1	two	CARDINAL
fuelectenerg-671	33	1	2	CARDINAL
fuelectenerg-671	34	1	fig	ORG
fuelectenerg-671	35	1	1	CARDINAL
fuelectenerg-671	35	2	3-d	QUANTITY
fuelectenerg-671	35	3	two	CARDINAL
fuelectenerg-671	36	1	two	CARDINAL
fuelectenerg-671	36	2	459 3	CARDINAL
fuelectenerg-671	38	1	11	CARDINAL
fuelectenerg-671	41	1	msc nastran	PERSON
fuelectenerg-671	41	2	nasa	ORG
fuelectenerg-671	41	3	msc patran	PERSON
fuelectenerg-671	43	1	2	CARDINAL
fuelectenerg-671	43	2	3-d	QUANTITY
fuelectenerg-671	44	1	three	CARDINAL
fuelectenerg-671	45	1	45	CARDINAL
fuelectenerg-671	47	1	2	CARDINAL
fuelectenerg-671	47	2	3-d	QUANTITY
fuelectenerg-671	47	3	3 μm	CARDINAL
fuelectenerg-671	47	4	5 μm	CARDINAL
fuelectenerg-671	47	5	9 μm	CARDINAL
fuelectenerg-671	48	1	45	CARDINAL
fuelectenerg-671	49	1	460 a. m. collins	PERSON
fuelectenerg-671	49	2	y. pan	PERSON
fuelectenerg-671	49	3	a. s. holland	PERSON
fuelectenerg-671	49	4	zero	CARDINAL
fuelectenerg-671	51	1	2	CARDINAL
fuelectenerg-671	53	1	1×10 -9 ω·cm 2	MONEY
fuelectenerg-671	54	1	3-d	QUANTITY
fuelectenerg-671	56	1	3	CARDINAL
fuelectenerg-671	57	1	3	CARDINAL
fuelectenerg-671	57	2	fig	PERSON
fuelectenerg-671	58	1	3	CARDINAL
fuelectenerg-671	58	2	two	CARDINAL
fuelectenerg-671	58	3	0.0001 ω·cm 0.001	MONEY
fuelectenerg-671	59	1	3 μm	CARDINAL
fuelectenerg-671	59	2	5 μm	CARDINAL
fuelectenerg-671	59	3	9 μm	CARDINAL
fuelectenerg-671	60	1	3	CARDINAL
fuelectenerg-671	60	2	3	CARDINAL
fuelectenerg-671	60	3	3	CARDINAL
fuelectenerg-671	61	1	3	CARDINAL
fuelectenerg-671	61	2	2 n	PERSON
fuelectenerg-671	64	1	4	CARDINAL
fuelectenerg-671	65	1	3	CARDINAL
fuelectenerg-671	67	1	two	CARDINAL
fuelectenerg-671	67	2	461	CARDINAL
fuelectenerg-671	68	1	4	CARDINAL
fuelectenerg-671	68	2	two	CARDINAL
fuelectenerg-671	68	3	0.001 ω·cm 0.01	MONEY
fuelectenerg-671	69	1	3 μm	CARDINAL
fuelectenerg-671	69	2	5 μm	CARDINAL
fuelectenerg-671	69	3	9 μm	CARDINAL
fuelectenerg-671	70	1	3	CARDINAL
fuelectenerg-671	71	1	4	CARDINAL
fuelectenerg-671	71	2	200	CARDINAL
fuelectenerg-671	71	3	ge	ORG
fuelectenerg-671	72	1	two	CARDINAL
fuelectenerg-671	73	1	6 μm	CARDINAL
fuelectenerg-671	73	2	10 μm	CARDINAL
fuelectenerg-671	73	3	18 μm	CARDINAL
fuelectenerg-671	73	4	24 μm	CARDINAL
fuelectenerg-671	73	5	40 μm	CARDINAL
fuelectenerg-671	74	1	72 μm	CARDINAL
fuelectenerg-671	74	2	fig	ORG
fuelectenerg-671	75	1	5	CARDINAL
fuelectenerg-671	75	2	15 μm	CARDINAL
fuelectenerg-671	75	3	25 μm	CARDINAL
fuelectenerg-671	75	4	45 μm	CARDINAL
fuelectenerg-671	75	5	fig	ORG
fuelectenerg-671	76	1	5	CARDINAL
fuelectenerg-671	76	2	two	CARDINAL
fuelectenerg-671	76	3	ge	ORG
fuelectenerg-671	77	1	15 μm	CARDINAL
fuelectenerg-671	77	2	25 μm	CARDINAL
fuelectenerg-671	77	3	45 μm	CARDINAL
fuelectenerg-671	79	1	3 inch	QUANTITY
fuelectenerg-671	79	2	220 μm	QUANTITY
fuelectenerg-671	79	3	1×1 cm 2	QUANTITY
fuelectenerg-671	79	4	462 a. m. collins	ORG
fuelectenerg-671	79	5	y. pan	PERSON
fuelectenerg-671	79	6	a. s. holland	PERSON
fuelectenerg-671	79	7	100 solvent	QUANTITY
fuelectenerg-671	79	8	80 ºc	QUANTITY
fuelectenerg-671	79	9	15 minutes	TIME
fuelectenerg-671	80	1	1512	CARDINAL
fuelectenerg-671	80	2	90 ºc	QUANTITY
fuelectenerg-671	80	3	90 seconds	TIME
fuelectenerg-671	81	1	8 seconds	TIME
fuelectenerg-671	81	2	60 seconds	TIME
fuelectenerg-671	81	3	1:4	CARDINAL
fuelectenerg-671	81	4	az 400k	PERSON
fuelectenerg-671	81	5	25 seconds	TIME
fuelectenerg-671	83	1	200	CARDINAL
fuelectenerg-671	83	2	ge	ORG
fuelectenerg-671	83	3	90º	CARDINAL
fuelectenerg-671	83	4	30 minutes	TIME
fuelectenerg-671	85	1	200	CARDINAL
fuelectenerg-671	86	1	1100 ºc	QUANTITY
fuelectenerg-671	86	2	30 minutes	TIME
fuelectenerg-671	89	1	fig	PERSON
fuelectenerg-671	90	1	6	CARDINAL
fuelectenerg-671	90	2	two	CARDINAL
fuelectenerg-671	90	3	4h	CARDINAL
fuelectenerg-671	91	1	30 μm	CARDINAL
fuelectenerg-671	91	2	50 μm	CARDINAL
fuelectenerg-671	91	3	90 μm	CARDINAL
fuelectenerg-671	92	1	ge	ORG
fuelectenerg-671	92	2	four	CARDINAL
fuelectenerg-671	92	3	0.035 ω·cm	MONEY
fuelectenerg-671	93	1	ten	CARDINAL
fuelectenerg-671	94	1	0.6 μm	CARDINAL
fuelectenerg-671	95	1	two	CARDINAL
fuelectenerg-671	95	2	ge	ORG
fuelectenerg-671	96	1	4.78	CARDINAL
fuelectenerg-671	96	2	17.23	CARDINAL
fuelectenerg-671	98	1	4	CARDINAL
fuelectenerg-671	98	2	3	CARDINAL
fuelectenerg-671	99	1	1	CARDINAL
fuelectenerg-671	99	2	two	CARDINAL
fuelectenerg-671	99	3	463	CARDINAL
fuelectenerg-671	99	4	1	CARDINAL
fuelectenerg-671	100	1	1	CARDINAL
fuelectenerg-671	100	2	15.68	CARDINAL
fuelectenerg-671	100	3	2	CARDINAL
fuelectenerg-671	100	4	17.23	CARDINAL
fuelectenerg-671	100	5	3	CARDINAL
fuelectenerg-671	100	6	14.77	CARDINAL
fuelectenerg-671	101	1	4	CARDINAL
fuelectenerg-671	101	2	6.98	CARDINAL
fuelectenerg-671	101	3	5	CARDINAL
fuelectenerg-671	101	4	6.48	CARDINAL
fuelectenerg-671	101	5	6	CARDINAL
fuelectenerg-671	101	6	5.93	CARDINAL
fuelectenerg-671	101	7	-6 7	DATE
fuelectenerg-671	101	8	5.54	CARDINAL
fuelectenerg-671	101	9	-6 8	DATE
fuelectenerg-671	101	10	6.06	CARDINAL
fuelectenerg-671	101	11	4.43	CARDINAL
fuelectenerg-671	101	12	10	CARDINAL
fuelectenerg-671	101	13	4.78	CARDINAL
fuelectenerg-671	101	14	6 μm	CARDINAL
fuelectenerg-671	101	15	10 μm	CARDINAL
fuelectenerg-671	101	16	18 μm	CARDINAL
fuelectenerg-671	102	1	15 μm	CARDINAL
fuelectenerg-671	102	2	25 μm	CARDINAL
fuelectenerg-671	102	3	45 μm	CARDINAL
fuelectenerg-671	103	1	24 μm	CARDINAL
fuelectenerg-671	103	2	40 μm	CARDINAL
fuelectenerg-671	103	3	72 μm	CARDINAL
fuelectenerg-671	103	4	2	CARDINAL
fuelectenerg-671	104	1	1	CARDINAL
fuelectenerg-671	104	2	140	CARDINAL
fuelectenerg-671	104	3	2	CARDINAL
fuelectenerg-671	104	4	125	CARDINAL
fuelectenerg-671	104	5	3	CARDINAL
fuelectenerg-671	104	6	129	CARDINAL
fuelectenerg-671	104	7	4	CARDINAL
fuelectenerg-671	104	8	137	CARDINAL
fuelectenerg-671	104	9	5	CARDINAL
fuelectenerg-671	104	10	150	CARDINAL
fuelectenerg-671	104	11	6 d	MONEY
fuelectenerg-671	104	12	7 d	PERCENT
fuelectenerg-671	105	1	9	CARDINAL
fuelectenerg-671	105	2	10	CARDINAL
fuelectenerg-671	105	3	24 μm	CARDINAL
fuelectenerg-671	105	4	40 μm	CARDINAL
fuelectenerg-671	105	5	72 μm	CARDINAL
fuelectenerg-671	106	1	30 μm	CARDINAL
fuelectenerg-671	106	2	50 μm	CARDINAL
fuelectenerg-671	107	1	90 μm	CARDINAL
fuelectenerg-671	108	1	ge	ORG
fuelectenerg-671	108	2	four	CARDINAL
fuelectenerg-671	109	1	0.01 ω cm	QUANTITY
fuelectenerg-671	110	1	ten	CARDINAL
fuelectenerg-671	110	2	two	CARDINAL
fuelectenerg-671	111	1	150	CARDINAL
fuelectenerg-671	112	1	ω·cm 2	ORG
fuelectenerg-671	113	1	2	CARDINAL
fuelectenerg-671	113	2	5	CARDINAL
fuelectenerg-671	113	3	3-d	QUANTITY
fuelectenerg-671	113	4	two	CARDINAL
fuelectenerg-671	115	1	ge	ORG
fuelectenerg-671	115	2	464	CARDINAL
fuelectenerg-671	115	3	a. m. collins	PERSON
fuelectenerg-671	115	4	y. pan	PERSON
fuelectenerg-671	115	5	a. s. holland	PERSON
fuelectenerg-671	115	6	2.3-27	CARDINAL
fuelectenerg-671	117	1	second	ORDINAL
fuelectenerg-671	117	2	second	ORDINAL
fuelectenerg-671	118	1	1.3-2.4	MONEY
fuelectenerg-671	118	2	ω·cm 2	ORG
fuelectenerg-671	120	1	1	CARDINAL
fuelectenerg-671	120	2	d. k. schroder	PERSON
fuelectenerg-671	120	3	3rd	ORDINAL
fuelectenerg-671	121	1	hoboken	GPE
fuelectenerg-671	121	2	nj	ORG
fuelectenerg-671	121	3	wiley	PERSON
fuelectenerg-671	122	1	135	CARDINAL
fuelectenerg-671	123	1	2	CARDINAL
fuelectenerg-671	123	2	g. k. reeves	PERSON
fuelectenerg-671	123	3	h. b. harrison	PERSON
fuelectenerg-671	123	4	edl-3	ORG
fuelectenerg-671	123	5	5	CARDINAL
fuelectenerg-671	124	1	111–113	DATE
fuelectenerg-671	124	2	may 1982	DATE
fuelectenerg-671	125	1	3	CARDINAL
fuelectenerg-671	125	2	s. j. proctor	PERSON
fuelectenerg-671	125	3	l. w. linholm	PERSON
fuelectenerg-671	125	4	j. a. mazer	PERSON
fuelectenerg-671	127	1	11	CARDINAL
fuelectenerg-671	128	1	1535–1542, november 1983	DATE
fuelectenerg-671	129	1	4	CARDINAL
fuelectenerg-671	129	2	m. ostling	PERSON
fuelectenerg-671	129	3	kelvin	PERSON
fuelectenerg-671	131	1	59	DATE
fuelectenerg-671	131	2	6	CARDINAL
fuelectenerg-671	132	1	1585–1591, june 2012	DATE
fuelectenerg-671	133	1	5	CARDINAL
fuelectenerg-671	133	2	k. w. j. findlay	PERSON
fuelectenerg-671	133	3	w. j. c. alexander	PERSON
fuelectenerg-671	133	4	a. j. walton	PERSON
fuelectenerg-671	133	5	kelvin	PERSON
fuelectenerg-671	135	1	microelectron	ORG
fuelectenerg-671	136	1	march 1989	DATE
fuelectenerg-671	136	2	2	CARDINAL
fuelectenerg-671	137	1	133–138	CARDINAL
fuelectenerg-671	138	1	6	CARDINAL
fuelectenerg-671	138	2	d. b. scott	PERSON
fuelectenerg-671	138	3	r. a. chapman	PERSON
fuelectenerg-671	139	1	wei	PERSON
fuelectenerg-671	139	2	s. s. mahant-shetti	PERSON
fuelectenerg-671	139	3	r. a. haken	PERSON
fuelectenerg-671	139	4	t. c. holloway	PERSON
fuelectenerg-671	139	5	1-μm	QUANTITY
fuelectenerg-671	140	1	3	CARDINAL
fuelectenerg-671	141	1	562–574	CARDINAL
fuelectenerg-671	141	2	march 1987	DATE
fuelectenerg-671	142	1	7	CARDINAL
fuelectenerg-671	142	2	g. k. reeves	PERSON
fuelectenerg-671	143	1	23	CARDINAL
fuelectenerg-671	143	2	5	CARDINAL
fuelectenerg-671	144	1	487-490	CARDINAL
fuelectenerg-671	144	2	may 1980	DATE
fuelectenerg-671	145	1	8	CARDINAL
fuelectenerg-671	145	2	a. s. holland	PERSON
fuelectenerg-671	145	3	g. k. reeves	PERSON
fuelectenerg-671	145	4	w. leech	PERSON
fuelectenerg-671	147	1	51	DATE
fuelectenerg-671	147	2	6	CARDINAL
fuelectenerg-671	148	1	914-919	CARDINAL
fuelectenerg-671	148	2	june 2004	DATE
fuelectenerg-671	149	1	9	CARDINAL
fuelectenerg-671	149	2	g. k. reeves	PERSON
fuelectenerg-671	149	3	a. s. holland	PERSON
fuelectenerg-671	149	4	two	CARDINAL
fuelectenerg-671	149	5	60	CARDINAL
fuelectenerg-671	150	1	1202-1207	DATE
fuelectenerg-671	150	2	march 2013	DATE
fuelectenerg-671	151	1	10	CARDINAL
fuelectenerg-671	151	2	h. h. berger	PERSON
fuelectenerg-671	151	3	15	CARDINAL
fuelectenerg-671	151	4	2	CARDINAL
fuelectenerg-671	152	1	145	CARDINAL
fuelectenerg-671	152	2	february 1972	DATE
fuelectenerg-671	153	1	11	CARDINAL
fuelectenerg-671	153	2	a. m. collins	PERSON
fuelectenerg-671	153	3	a. s. holland	PERSON
fuelectenerg-671	153	4	two	CARDINAL
fuelectenerg-671	153	5	may 2014	DATE
fuelectenerg-671	154	1	257-260	CARDINAL