id	sid	eid	entity	type
fuelectenerg-900	1	1	28	CARDINAL
fuelectenerg-900	2	1	345 381	CARDINAL
fuelectenerg-900	2	2	10.2298	CARDINAL
fuelectenerg-900	2	3	ivana jokić	PERSON
fuelectenerg-900	2	4	1,2	CARDINAL
fuelectenerg-900	2	5	miloš	ORG
fuelectenerg-900	2	6	1,2	CARDINAL
fuelectenerg-900	2	7	zoran djurić 3	PERSON
fuelectenerg-900	2	8	miroslav l. dukić	PERSON
fuelectenerg-900	2	9	4 1	CARDINAL
fuelectenerg-900	2	10	university of belgrade	ORG
fuelectenerg-900	2	11	bulevar kralja	PERSON
fuelectenerg-900	2	12	aleksandra 83	ORG
fuelectenerg-900	2	13	11000	CARDINAL
fuelectenerg-900	2	14	belgrade	GPE
fuelectenerg-900	2	15	serbia 2 institute of chemistry	ORG
fuelectenerg-900	2	16	university of belgrade	ORG
fuelectenerg-900	2	17	12	CARDINAL
fuelectenerg-900	2	18	11000	CARDINAL
fuelectenerg-900	2	19	belgrade	GPE
fuelectenerg-900	2	20	serbia	GPE
fuelectenerg-900	2	21	3	CARDINAL
fuelectenerg-900	2	22	serbian	NORP
fuelectenerg-900	2	23	institute of technical sciences sasa	ORG
fuelectenerg-900	2	24	knez mihailova 35,	ORG
fuelectenerg-900	2	25	11000	CARDINAL
fuelectenerg-900	2	26	belgrade	GPE
fuelectenerg-900	2	27	serbia 4	ORG
fuelectenerg-900	2	28	singidunum university	ORG
fuelectenerg-900	2	29	29	CARDINAL
fuelectenerg-900	2	30	11000	CARDINAL
fuelectenerg-900	2	31	belgrade	GPE
fuelectenerg-900	2	32	serbia	GPE
fuelectenerg-900	3	1	the past two decades	DATE
fuelectenerg-900	4	1	first	ORDINAL
fuelectenerg-900	4	2	two	CARDINAL
fuelectenerg-900	8	1	second	ORDINAL
fuelectenerg-900	10	1	march 2, 2015	DATE
fuelectenerg-900	10	2	zoran djurić serbian academy of sciences and arts	ORG
fuelectenerg-900	10	3	institute of technical sciences sasa	ORG
fuelectenerg-900	10	4	knez mihailova 35,	ORG
fuelectenerg-900	10	5	11000	CARDINAL
fuelectenerg-900	10	6	belgrade	GPE
fuelectenerg-900	10	7	serbia	GPE
fuelectenerg-900	10	8	346	CARDINAL
fuelectenerg-900	10	9	i. jokić	PERSON
fuelectenerg-900	10	10	m. frantlović	PERSON
fuelectenerg-900	10	11	z. djurić	PERSON
fuelectenerg-900	10	12	m. l. dukić 1	PERSON
fuelectenerg-900	10	13	the past two decades	DATE
fuelectenerg-900	22	1	14	CARDINAL
fuelectenerg-900	23	1	first	ORDINAL
fuelectenerg-900	23	2	347	CARDINAL
fuelectenerg-900	26	1	two	CARDINAL
fuelectenerg-900	26	2	2d	DATE
fuelectenerg-900	29	1	second	ORDINAL
fuelectenerg-900	29	2	mass.	GPE
fuelectenerg-900	31	1	2	CARDINAL
fuelectenerg-900	31	2	nems resonators	ORG
fuelectenerg-900	31	3	10	CARDINAL
fuelectenerg-900	32	1	the end of 1980s	DATE
fuelectenerg-900	35	1	1a	CARDINAL
fuelectenerg-900	37	1	1b	CARDINAL
fuelectenerg-900	38	1	2.1	CARDINAL
fuelectenerg-900	43	1	f0·q	GPE
fuelectenerg-900	43	2	348	CARDINAL
fuelectenerg-900	43	3	i. jokić	PERSON
fuelectenerg-900	43	4	m. frantlović	PERSON
fuelectenerg-900	43	5	z. djurić	PERSON
fuelectenerg-900	43	6	m. l. dukić	PERSON
fuelectenerg-900	45	1	1 khz	QUANTITY
fuelectenerg-900	45	2	1	CARDINAL
fuelectenerg-900	46	1	30–50	CARDINAL
fuelectenerg-900	46	2	0.8	CARDINAL
fuelectenerg-900	46	3	5.5	CARDINAL
fuelectenerg-900	47	1	10 6	CARDINAL
fuelectenerg-900	48	1	0–70 ºc	PERSON
fuelectenerg-900	49	1	2	CARDINAL
fuelectenerg-900	53	1	better than 3 ppm	QUANTITY
fuelectenerg-900	53	2	4	CARDINAL
fuelectenerg-900	54	1	50	CARDINAL
fuelectenerg-900	55	1	fig	ORG
fuelectenerg-900	56	1	1	CARDINAL
fuelectenerg-900	58	1	baw	PERSON
fuelectenerg-900	59	1	baw	PERSON
fuelectenerg-900	61	1	10	CARDINAL
fuelectenerg-900	61	2	khz–10	GPE
fuelectenerg-900	62	1	349	CARDINAL
fuelectenerg-900	63	1	10	CARDINAL
fuelectenerg-900	63	2	6	CARDINAL
fuelectenerg-900	64	1	50	CARDINAL
fuelectenerg-900	64	2	1 ppm	CARDINAL
fuelectenerg-900	64	3	100c	CARDINAL
fuelectenerg-900	67	1	the past two decades	DATE
fuelectenerg-900	67	2	1-4	CARDINAL
fuelectenerg-900	69	1	two	CARDINAL
fuelectenerg-900	71	1	f0·q	GPE
fuelectenerg-900	71	2	1	CARDINAL
fuelectenerg-900	71	3	lowcost mass	ORG
fuelectenerg-900	71	4	cmos ics	ORG
fuelectenerg-900	81	1	3	CARDINAL
fuelectenerg-900	83	1	2a	CARDINAL
fuelectenerg-900	85	1	350	CARDINAL
fuelectenerg-900	85	2	i. jokić	PERSON
fuelectenerg-900	85	3	m. frantlović	PERSON
fuelectenerg-900	85	4	z. djurić	PERSON
fuelectenerg-900	85	5	m. l. dukić	PERSON
fuelectenerg-900	85	6	two	CARDINAL
fuelectenerg-900	89	1	less than 1 μm	MONEY
fuelectenerg-900	92	1	fig	ORG
fuelectenerg-900	93	1	2	CARDINAL
fuelectenerg-900	101	1	351	CARDINAL
fuelectenerg-900	101	2	zno	ORG
fuelectenerg-900	101	3	2b	CARDINAL
fuelectenerg-900	101	4	2c	CARDINAL
fuelectenerg-900	106	1	baw	PERSON
fuelectenerg-900	108	1	baw resonators	PERSON
fuelectenerg-900	109	1	baw resonators	PERSON
fuelectenerg-900	113	1	about 1 μm	CARDINAL
fuelectenerg-900	113	2	10-100 μm	QUANTITY
fuelectenerg-900	114	1	one	CARDINAL
fuelectenerg-900	116	1	two	CARDINAL
fuelectenerg-900	117	1	5	CARDINAL
fuelectenerg-900	120	1	6	CARDINAL
fuelectenerg-900	122	1	one	CARDINAL
fuelectenerg-900	125	1	352	CARDINAL
fuelectenerg-900	125	2	i. jokić	PERSON
fuelectenerg-900	125	3	m. frantlović	PERSON
fuelectenerg-900	125	4	z. djurić	PERSON
fuelectenerg-900	125	5	m. l. dukić	PERSON
fuelectenerg-900	127	1	3	CARDINAL
fuelectenerg-900	137	1	400	CARDINAL
fuelectenerg-900	137	2	10	CARDINAL
fuelectenerg-900	137	3	1000-3000	CARDINAL
fuelectenerg-900	139	1	10 12	CARDINAL
fuelectenerg-900	139	2	8-10	CARDINAL
fuelectenerg-900	140	1	843	CARDINAL
fuelectenerg-900	140	2	1.64	CARDINAL
fuelectenerg-900	140	3	2200	CARDINAL
fuelectenerg-900	141	1	8	CARDINAL
fuelectenerg-900	142	1	second	ORDINAL
fuelectenerg-900	142	2	11	CARDINAL
fuelectenerg-900	142	3	7000	CARDINAL
fuelectenerg-900	143	1	12	CARDINAL
fuelectenerg-900	144	1	dc	GPE
fuelectenerg-900	144	2	ae	ORG
fuelectenerg-900	145	1	ae	ORG
fuelectenerg-900	147	1	15	CARDINAL
fuelectenerg-900	147	2	16	CARDINAL
fuelectenerg-900	148	1	4	CARDINAL
fuelectenerg-900	148	2	17	CARDINAL
fuelectenerg-900	148	3	353	CARDINAL
fuelectenerg-900	149	1	fig	ORG
fuelectenerg-900	150	1	3	CARDINAL
fuelectenerg-900	150	2	14	CARDINAL
fuelectenerg-900	150	3	16	CARDINAL
fuelectenerg-900	154	1	fig	ORG
fuelectenerg-900	155	1	3	CARDINAL
fuelectenerg-900	157	1	32	CARDINAL
fuelectenerg-900	160	1	450c	CARDINAL
fuelectenerg-900	160	2	3	CARDINAL
fuelectenerg-900	162	1	354	CARDINAL
fuelectenerg-900	162	2	i. jokić	PERSON
fuelectenerg-900	162	3	m. frantlović	PERSON
fuelectenerg-900	162	4	z. djurić	PERSON
fuelectenerg-900	162	5	m. l. dukić	PERSON
fuelectenerg-900	164	1	450c	CARDINAL
fuelectenerg-900	165	1	6	CARDINAL
fuelectenerg-900	166	1	500	CARDINAL
fuelectenerg-900	166	2	0.6 μm	QUANTITY
fuelectenerg-900	166	3	33	CARDINAL
fuelectenerg-900	167	1	more than a decade	DATE
fuelectenerg-900	167	2	34	CARDINAL
fuelectenerg-900	170	1	2	CARDINAL
fuelectenerg-900	170	2	35	CARDINAL
fuelectenerg-900	170	3	one	CARDINAL
fuelectenerg-900	171	1	38	CARDINAL
fuelectenerg-900	173	1	9-11	CARDINAL
fuelectenerg-900	173	2	39	CARDINAL
fuelectenerg-900	179	1	40	CARDINAL
fuelectenerg-900	180	1	15 ppm/°	QUANTITY
fuelectenerg-900	180	2	30	CARDINAL
fuelectenerg-900	180	3	40	CARDINAL
fuelectenerg-900	181	1	25 ppm/°	QUANTITY
fuelectenerg-900	181	2	41	CARDINAL
fuelectenerg-900	183	1	42	CARDINAL
fuelectenerg-900	183	2	3	CARDINAL
fuelectenerg-900	184	1	45	CARDINAL
fuelectenerg-900	184	2	46	DATE
fuelectenerg-900	185	1	355	CARDINAL
fuelectenerg-900	185	2	47	CARDINAL
fuelectenerg-900	187	1	49	CARDINAL
fuelectenerg-900	188	1	50	CARDINAL
fuelectenerg-900	189	1	12	CARDINAL
fuelectenerg-900	189	2	13	CARDINAL
fuelectenerg-900	189	3	48	CARDINAL
fuelectenerg-900	191	1	8.4%	PERCENT
fuelectenerg-900	191	2	51	CARDINAL
fuelectenerg-900	192	1	1	CARDINAL
fuelectenerg-900	192	2	1.47%	PERCENT
fuelectenerg-900	192	3	7v	CARDINAL
fuelectenerg-900	192	4	52	CARDINAL
fuelectenerg-900	193	1	one	CARDINAL
fuelectenerg-900	194	1	0.1-300 ppm	MONEY
fuelectenerg-900	194	2	60 k	QUANTITY
fuelectenerg-900	194	3	200	QUANTITY
fuelectenerg-900	196	1	3	CARDINAL
fuelectenerg-900	198	1	53	CARDINAL
fuelectenerg-900	199	1	ppm/year	DATE
fuelectenerg-900	199	2	54	CARDINAL
fuelectenerg-900	199	3	53	CARDINAL
fuelectenerg-900	199	4	55	DATE
fuelectenerg-900	202	1	41	CARDINAL
fuelectenerg-900	206	1	50	CARDINAL
fuelectenerg-900	211	1	3	CARDINAL
fuelectenerg-900	212	1	1-100	CARDINAL
fuelectenerg-900	212	2	3	CARDINAL
fuelectenerg-900	213	1	31	CARDINAL
fuelectenerg-900	213	2	56	CARDINAL
fuelectenerg-900	213	3	340	CARDINAL
fuelectenerg-900	213	4	57	CARDINAL
fuelectenerg-900	213	5	1	CARDINAL
fuelectenerg-900	214	1	29	CARDINAL
fuelectenerg-900	215	1	356	CARDINAL
fuelectenerg-900	215	2	i. jokić	PERSON
fuelectenerg-900	215	3	m. frantlović	PERSON
fuelectenerg-900	215	4	z. djurić	PERSON
fuelectenerg-900	215	5	m. l. dukić	PERSON
fuelectenerg-900	215	6	q=130000	ORG
fuelectenerg-900	215	7	4.47	CARDINAL
fuelectenerg-900	216	1	23	CARDINAL
fuelectenerg-900	217	1	2.1	CARDINAL
fuelectenerg-900	217	2	f0=24 mhz	ORG
fuelectenerg-900	217	3	q=53000	ORG
fuelectenerg-900	218	1	58	CARDINAL
fuelectenerg-900	218	2	145	CARDINAL
fuelectenerg-900	218	3	2.4	CARDINAL
fuelectenerg-900	219	1	59	CARDINAL
fuelectenerg-900	220	1	60	CARDINAL
fuelectenerg-900	220	2	5	CARDINAL
fuelectenerg-900	220	3	61	CARDINAL
fuelectenerg-900	220	4	500	CARDINAL
fuelectenerg-900	220	5	966	CARDINAL
fuelectenerg-900	221	1	62	CARDINAL
fuelectenerg-900	221	2	q=8000	ORG
fuelectenerg-900	224	1	f0	CARDINAL
fuelectenerg-900	225	1	50	CARDINAL
fuelectenerg-900	227	1	223	CARDINAL
fuelectenerg-900	227	2	656	CARDINAL
fuelectenerg-900	227	3	between 56	CARDINAL
fuelectenerg-900	227	4	205 	QUANTITY
fuelectenerg-900	228	1	9	CARDINAL
fuelectenerg-900	231	1	11	CARDINAL
fuelectenerg-900	231	2	39	CARDINAL
fuelectenerg-900	232	1	18	CARDINAL
fuelectenerg-900	232	2	63	DATE
fuelectenerg-900	241	1	1	CARDINAL
fuelectenerg-900	241	2	100	CARDINAL
fuelectenerg-900	241	3	18	CARDINAL
fuelectenerg-900	242	1	linear	ORG
fuelectenerg-900	242	2	357	CARDINAL
fuelectenerg-900	242	3	1	CARDINAL
fuelectenerg-900	246	1	1	CARDINAL
fuelectenerg-900	247	1	64	CARDINAL
fuelectenerg-900	250	1	several thousand	CARDINAL
fuelectenerg-900	251	1	the year 2000	DATE
fuelectenerg-900	252	1	2001	DATE
fuelectenerg-900	253	1	first	ORDINAL
fuelectenerg-900	255	1	baw	PERSON
fuelectenerg-900	257	1	two	CARDINAL
fuelectenerg-900	257	2	18501880	DATE
fuelectenerg-900	257	3	1880-1910	DATE
fuelectenerg-900	257	4	90%	PERCENT
fuelectenerg-900	259	1	the past decade	DATE
fuelectenerg-900	259	2	8	CARDINAL
fuelectenerg-900	261	1	first	ORDINAL
fuelectenerg-900	261	2	2003	DATE
fuelectenerg-900	262	1	30	CARDINAL
fuelectenerg-900	262	2	19.2	CARDINAL
fuelectenerg-900	263	1	the following year	DATE
fuelectenerg-900	263	2	first	ORDINAL
fuelectenerg-900	263	3	1.6	CARDINAL
fuelectenerg-900	264	1	2006	DATE
fuelectenerg-900	264	2	first	ORDINAL
fuelectenerg-900	265	1	5	CARDINAL
fuelectenerg-900	265	2	4.6	CARDINAL
fuelectenerg-900	265	3	0.5 ppm	MONEY
fuelectenerg-900	265	4	800	CARDINAL
fuelectenerg-900	265	5	600	CARDINAL
fuelectenerg-900	265	6	si 358 i. jokić	ORG
fuelectenerg-900	265	7	m. frantlović	PERSON
fuelectenerg-900	265	8	z. djurić	PERSON
fuelectenerg-900	265	9	m. l. dukić mems	PERSON
fuelectenerg-900	266	1	2	CARDINAL
fuelectenerg-900	269	1	4	CARDINAL
fuelectenerg-900	270	1	65	CARDINAL
fuelectenerg-900	275	1	2.2	CARDINAL
fuelectenerg-900	277	1	first	ORDINAL
fuelectenerg-900	277	2	1/2	CARDINAL
fuelectenerg-900	279	1	4	CARDINAL
fuelectenerg-900	281	1	66	CARDINAL
fuelectenerg-900	282	1	the h/l 2	EVENT
fuelectenerg-900	287	1	spring	DATE
fuelectenerg-900	289	1	one	CARDINAL
fuelectenerg-900	289	2	spring	DATE
fuelectenerg-900	290	1	359	CARDINAL
fuelectenerg-900	292	1	fig	ORG
fuelectenerg-900	293	1	4	CARDINAL
fuelectenerg-900	293	2	first	ORDINAL
fuelectenerg-900	294	1	2	CARDINAL
fuelectenerg-900	295	1		GPE
fuelectenerg-900	296	1	1	CARDINAL
fuelectenerg-900	296	2	1	CARDINAL
fuelectenerg-900	296	3	0(	PERCENT
fuelectenerg-900	296	4	22	CARDINAL
fuelectenerg-900	296	5	2 22	TIME
fuelectenerg-900	296	6	2 00	QUANTITY
fuelectenerg-900	296	7	wh ei l nz nz	PERSON
fuelectenerg-900	297	1	fnf	GPE
fuelectenerg-900	297	2	1	CARDINAL
fuelectenerg-900	298	1	3 /12	PERCENT
fuelectenerg-900	298	2	22	CARDINAL
fuelectenerg-900	298	3	2	CARDINAL
fuelectenerg-900	299	1	67	CARDINAL
fuelectenerg-900	299	2	1)/1sinh()sin()]/12/([)/1cosh()cos	CARDINAL
fuelectenerg-900	299	3	2222 	DATE
fuelectenerg-900	299	4	3	CARDINAL
fuelectenerg-900	299	5	i. jokić	PERSON
fuelectenerg-900	299	6	m. frantlović	PERSON
fuelectenerg-900	299	7	z. djurić	PERSON
fuelectenerg-900	300	1	m. l. dukić	PERSON
fuelectenerg-900	300	2	first	ORDINAL
fuelectenerg-900	300	3	three	CARDINAL
fuelectenerg-900	300	4	p≈0	PERSON
fuelectenerg-900	301	1	3	CARDINAL
fuelectenerg-900	301	2	4	CARDINAL
fuelectenerg-900	302	1	2	CARDINAL
fuelectenerg-900	302	2	1	CARDINAL
fuelectenerg-900	303	1	3	CARDINAL
fuelectenerg-900	303	2	5	CARDINAL
fuelectenerg-900	303	3	first	ORDINAL
fuelectenerg-900	304	1	3	CARDINAL
fuelectenerg-900	306	1	4b	CARDINAL
fuelectenerg-900	308	1	first	ORDINAL
fuelectenerg-900	311	1	2	CARDINAL
fuelectenerg-900	312	1	1%	PERCENT
fuelectenerg-900	312	2	3.3	CARDINAL
fuelectenerg-900	313	1	fig	ORG
fuelectenerg-900	314	1	5a	CARDINAL
fuelectenerg-900	314	2	first	ORDINAL
fuelectenerg-900	316	1	two	CARDINAL
fuelectenerg-900	317	1	first	ORDINAL
fuelectenerg-900	317	2	2	CARDINAL
fuelectenerg-900	317	3	1	CARDINAL
fuelectenerg-900	317	4	4	CARDINAL
fuelectenerg-900	319	1	second	ORDINAL
fuelectenerg-900	319	2	3.3	CARDINAL
fuelectenerg-900	320	1	2	CARDINAL
fuelectenerg-900	320	2	1	CARDINAL
fuelectenerg-900	323	1	5b	CARDINAL
fuelectenerg-900	323	2	three	CARDINAL
fuelectenerg-900	323	3	l/h	ORG
fuelectenerg-900	323	4	20	CARDINAL
fuelectenerg-900	323	5	100	CARDINAL
fuelectenerg-900	323	6	1000	CARDINAL
fuelectenerg-900	324	1	l/h.	ORG
fuelectenerg-900	324	2	l/h	ORG
fuelectenerg-900	325	1	l/h	ORG
fuelectenerg-900	326	1	361	CARDINAL
fuelectenerg-900	327	1	5	CARDINAL
fuelectenerg-900	327	2	first	ORDINAL
fuelectenerg-900	327	3	three	CARDINAL
fuelectenerg-900	327	4	l/h.	ORG
fuelectenerg-900	328	1	1	CARDINAL
fuelectenerg-900	329	1	2	CARDINAL
fuelectenerg-900	330	1	3	CARDINAL
fuelectenerg-900	331	1	nems resonators	ORG
fuelectenerg-900	331	2	68	CARDINAL
fuelectenerg-900	332	1	2.3	CARDINAL
fuelectenerg-900	333	1	at least one	CARDINAL
fuelectenerg-900	333	2	1	CARDINAL
fuelectenerg-900	334	1	the year 2000	DATE
fuelectenerg-900	336	1	66	CARDINAL
fuelectenerg-900	336	2	69	CARDINAL
fuelectenerg-900	337	1	between 1-20 μm	QUANTITY
fuelectenerg-900	338	1	10 -14	TIME
fuelectenerg-900	338	2	10 ghz	QUANTITY
fuelectenerg-900	338	3	70	CARDINAL
fuelectenerg-900	338	4	as low as	CARDINAL
fuelectenerg-900	338	5	10 -17 w. 362 i. jokić	QUANTITY
fuelectenerg-900	338	6	m. frantlović	PERSON
fuelectenerg-900	338	7	z. djurić	PERSON
fuelectenerg-900	338	8	m. l. dukić	PERSON
fuelectenerg-900	338	9	first	ORDINAL
fuelectenerg-900	338	10	7.7 μm  330	QUANTITY
fuelectenerg-900	338	11	1996	DATE
fuelectenerg-900	338	12	4	CARDINAL
fuelectenerg-900	338	13	69	CARDINAL
fuelectenerg-900	339	1	380	CARDINAL
fuelectenerg-900	339	2	1000	CARDINAL
fuelectenerg-900	339	3	73	CARDINAL
fuelectenerg-900	340	1	first	ORDINAL
fuelectenerg-900	340	2	1	CARDINAL
fuelectenerg-900	340	3	74	CARDINAL
fuelectenerg-900	341	1	one	CARDINAL
fuelectenerg-900	341	2	1.029	CARDINAL
fuelectenerg-900	341	3	1.1 μm	QUANTITY
fuelectenerg-900	341	4	120	CARDINAL
fuelectenerg-900	341	5	75	CARDINAL
fuelectenerg-900	342	1	10	CARDINAL
fuelectenerg-900	342	2	100	CARDINAL
fuelectenerg-900	342	3	75	CARDINAL
fuelectenerg-900	342	4	76	DATE
fuelectenerg-900	343	1	4 μm	QUANTITY
fuelectenerg-900	343	2	320	CARDINAL
fuelectenerg-900	343	3	78.2	CARDINAL
fuelectenerg-900	343	4	77	CARDINAL
fuelectenerg-900	344	1	al	PERSON
fuelectenerg-900	344	2	10	CARDINAL
fuelectenerg-900	344	3	100	CARDINAL
fuelectenerg-900	344	4	1000	CARDINAL
fuelectenerg-900	344	5	4 k	QUANTITY
fuelectenerg-900	345	1	78	CARDINAL
fuelectenerg-900	345	2	79	CARDINAL
fuelectenerg-900	346	1	l/h	ORG
fuelectenerg-900	347	1	ge	ORG
fuelectenerg-900	347	2	zno, gaas	ORG
fuelectenerg-900	348	1	78-83	CARDINAL
fuelectenerg-900	355	1	l/h250	ORG
fuelectenerg-900	355	2	20-25	CARDINAL
fuelectenerg-900	355	3	81	CARDINAL
fuelectenerg-900	356	1	gaas	PERSON
fuelectenerg-900	356	2	al	PERSON
fuelectenerg-900	356	3	nb	ORG
fuelectenerg-900	357	1	one	CARDINAL
fuelectenerg-900	357	2	20	CARDINAL
fuelectenerg-900	357	3	0.75	CARDINAL
fuelectenerg-900	357	4	m	ORG
fuelectenerg-900	357	5	8	CARDINAL
fuelectenerg-900	358	1	80	CARDINAL
fuelectenerg-900	359	1	5	CARDINAL
fuelectenerg-900	361	1	82	CARDINAL
fuelectenerg-900	361	2	70	CARDINAL
fuelectenerg-900	361	3	5	CARDINAL
fuelectenerg-900	361	4	m	ORG
fuelectenerg-900	365	1	83	CARDINAL
fuelectenerg-900	367	1	50-150	CARDINAL
fuelectenerg-900	367	2	about 2 m	CARDINAL
fuelectenerg-900	367	3	71	CARDINAL
fuelectenerg-900	368	1	about 200	CARDINAL
fuelectenerg-900	368	2	q2500	CARDINAL
fuelectenerg-900	368	3	50	CARDINAL
fuelectenerg-900	368	4	80	CARDINAL
fuelectenerg-900	368	5	q=13100	CARDINAL
fuelectenerg-900	368	6	q=5750	PRODUCT
fuelectenerg-900	368	7	363	CARDINAL
fuelectenerg-900	368	8	two	CARDINAL
fuelectenerg-900	368	9	10-100	CARDINAL
fuelectenerg-900	369	1	10 12	DATE
fuelectenerg-900	373	1	1–16	CARDINAL
fuelectenerg-900	377	1	10	CARDINAL
fuelectenerg-900	381	1	100	CARDINAL
fuelectenerg-900	381	2	77	CARDINAL
fuelectenerg-900	384	1	84	CARDINAL
fuelectenerg-900	385	1	85	CARDINAL
fuelectenerg-900	386	1	one	CARDINAL
fuelectenerg-900	386	2	86	CARDINAL
fuelectenerg-900	389	1	nems components	ORG
fuelectenerg-900	391	1	nems components	ORG
fuelectenerg-900	392	1	364	CARDINAL
fuelectenerg-900	392	2	i. jokić	PERSON
fuelectenerg-900	392	3	m. frantlović	PERSON
fuelectenerg-900	392	4	z. djurić	PERSON
fuelectenerg-900	392	5	m. l. dukić	PERSON
fuelectenerg-900	394	1	nems	ORG
fuelectenerg-900	400	1	thousands	CARDINAL
fuelectenerg-900	400	2	tens of thousands	CARDINAL
fuelectenerg-900	400	3	25	CARDINAL
fuelectenerg-900	400	4	50	CARDINAL
fuelectenerg-900	400	5	133	CARDINAL
fuelectenerg-900	400	6	10 6	CARDINAL
fuelectenerg-900	401	1	87	CARDINAL
fuelectenerg-900	408	1	section 3	LAW
fuelectenerg-900	409	1	2.4	CARDINAL
fuelectenerg-900	410	1	nems resonators	ORG
fuelectenerg-900	410	2	2d	DATE
fuelectenerg-900	410	3	recent years	DATE
fuelectenerg-900	410	4	one	CARDINAL
fuelectenerg-900	410	5	1d	CARDINAL
fuelectenerg-900	410	6	two	CARDINAL
fuelectenerg-900	410	7	2d	DATE
fuelectenerg-900	412	1	one	CARDINAL
fuelectenerg-900	413	1	2d	DATE
fuelectenerg-900	413	2	1d	CARDINAL
fuelectenerg-900	414	1	365	CARDINAL
fuelectenerg-900	414	2	2d	DATE
fuelectenerg-900	414	3	2d	DATE
fuelectenerg-900	414	4	e=1	GPE
fuelectenerg-900	414	5	25%	PERCENT
fuelectenerg-900	415	1	2	CARDINAL
fuelectenerg-900	418	1	1-3	CARDINAL
fuelectenerg-900	418	2	section 2.2	LAW
fuelectenerg-900	419	1	1	CARDINAL
fuelectenerg-900	419	2	m	ORG
fuelectenerg-900	419	3	1 %	PERCENT
fuelectenerg-900	419	4	2	CARDINAL
fuelectenerg-900	419	5	about 10 6	CARDINAL
fuelectenerg-900	419	6	fig	ORG
fuelectenerg-900	420	1	4b	CARDINAL
fuelectenerg-900	420	2	3.3	CARDINAL
fuelectenerg-900	422	1	nems resonators	ORG
fuelectenerg-900	423	1	fig	GPE
fuelectenerg-900	424	1	6a	CARDINAL
fuelectenerg-900	426	1	6b	CARDINAL
fuelectenerg-900	426	2	first	ORDINAL
fuelectenerg-900	426	3	1	CARDINAL
fuelectenerg-900	426	4	2	CARDINAL
fuelectenerg-900	426	5	m	ORG
fuelectenerg-900	426	6	eqs	ORG
fuelectenerg-900	427	1	1)-(3	CARDINAL
fuelectenerg-900	428	1	about 3000	CARDINAL
fuelectenerg-900	428	2	m	ORG
fuelectenerg-900	429	1	2d	DATE
fuelectenerg-900	429	2	1	CARDINAL
fuelectenerg-900	429	3	m	ORG
fuelectenerg-900	431	1	5a	CARDINAL
fuelectenerg-900	431	2	6b	CARDINAL
fuelectenerg-900	432	1	two	CARDINAL
fuelectenerg-900	435	1	first	ORDINAL
fuelectenerg-900	435	2	1991	DATE
fuelectenerg-900	435	3	88	CARDINAL
fuelectenerg-900	436	1	1-2	CARDINAL
fuelectenerg-900	436	2	89	CARDINAL
fuelectenerg-900	437	1	2	CARDINAL
fuelectenerg-900	437	2	several tens	CARDINAL
fuelectenerg-900	437	3	90	CARDINAL
fuelectenerg-900	439	1	366	CARDINAL
fuelectenerg-900	439	2	i. jokić	PERSON
fuelectenerg-900	439	3	m. frantlović	PERSON
fuelectenerg-900	439	4	z. djurić	PERSON
fuelectenerg-900	439	5	m. l. dukić fig	PERSON
fuelectenerg-900	440	1	6	CARDINAL
fuelectenerg-900	440	2	2d	DATE
fuelectenerg-900	440	3	first	ORDINAL
fuelectenerg-900	440	4	1	CARDINAL
fuelectenerg-900	440	5	2	CARDINAL
fuelectenerg-900	440	6	m	ORG
fuelectenerg-900	441	1	first	ORDINAL
fuelectenerg-900	441	2	1999	DATE
fuelectenerg-900	441	3	91	CARDINAL
fuelectenerg-900	442	1	2004	DATE
fuelectenerg-900	442	2	92	CARDINAL
fuelectenerg-900	443	1	92	CARDINAL
fuelectenerg-900	445	1	1-4	CARDINAL
fuelectenerg-900	445	2	1.75	CARDINAL
fuelectenerg-900	445	3	m	ORG
fuelectenerg-900	445	4	5.1-333 mhz	QUANTITY
fuelectenerg-900	445	5	50-100	CARDINAL
fuelectenerg-900	445	6	q=50	DATE
fuelectenerg-900	446	1	93	CARDINAL
fuelectenerg-900	447	1	94	CARDINAL
fuelectenerg-900	447	2	95	CARDINAL
fuelectenerg-900	448	1	as high as	CARDINAL
fuelectenerg-900	448	2	96	CARDINAL
fuelectenerg-900	449	1	10	CARDINAL
fuelectenerg-900	449	2	100	CARDINAL
fuelectenerg-900	450	1	3	CARDINAL
fuelectenerg-900	450	2	m	ORG
fuelectenerg-900	450	3	about 90	CARDINAL
fuelectenerg-900	450	4	10	CARDINAL
fuelectenerg-900	451	1	97	CARDINAL
fuelectenerg-900	452	1	98	CARDINAL
fuelectenerg-900	453	1	99	CARDINAL
fuelectenerg-900	454	1	10 5	CARDINAL
fuelectenerg-900	454	2	f0=350	CARDINAL
fuelectenerg-900	454	3	25 mk	QUANTITY
fuelectenerg-900	454	4	100	CARDINAL
fuelectenerg-900	455	1	about 700	CARDINAL
fuelectenerg-900	455	2	10	CARDINAL
fuelectenerg-900	455	3	-4 torr	PERSON
fuelectenerg-900	455	4	3	CARDINAL
fuelectenerg-900	455	5	m	ORG
fuelectenerg-900	455	6	97	CARDINAL
fuelectenerg-900	456	1	97	CARDINAL
fuelectenerg-900	456	2	spring	DATE
fuelectenerg-900	457	1	10	CARDINAL
fuelectenerg-900	457	2	as much as 200%	PERCENT
fuelectenerg-900	458	1	93	CARDINAL
fuelectenerg-900	458	2	2	CARDINAL
fuelectenerg-900	458	3	3.5	CARDINAL
fuelectenerg-900	458	4	367	CARDINAL
fuelectenerg-900	458	5	714	CARDINAL
fuelectenerg-900	459	1	101	CARDINAL
fuelectenerg-900	460	1	over 100%	PERCENT
fuelectenerg-900	460	2	0	CARDINAL
fuelectenerg-900	460	3	50	CARDINAL
fuelectenerg-900	460	4	50%	PERCENT
fuelectenerg-900	461	1	first	ORDINAL
fuelectenerg-900	461	2	102	CARDINAL
fuelectenerg-900	465	1	first	ORDINAL
fuelectenerg-900	465	2	2007	DATE
fuelectenerg-900	465	3	103	CARDINAL
fuelectenerg-900	467	1	spm	GPE
fuelectenerg-900	468	1	105	CARDINAL
fuelectenerg-900	469	1	10100	CARDINAL
fuelectenerg-900	470	1	1100  1930	DATE
fuelectenerg-900	470	2	0.3	CARDINAL
fuelectenerg-900	470	3	3	CARDINAL
fuelectenerg-900	470	4	q=78	PERSON
fuelectenerg-900	470	5	15	CARDINAL
fuelectenerg-900	470	6	f0=42	ORG
fuelectenerg-900	471	1	103	CARDINAL
fuelectenerg-900	472	1	4	CARDINAL
fuelectenerg-900	472	2	m	ORG
fuelectenerg-900	473	1	68	CARDINAL
fuelectenerg-900	473	2	about 2400	CARDINAL
fuelectenerg-900	473	3	22.5	CARDINAL
fuelectenerg-900	473	4	m	ORG
fuelectenerg-900	474	1	106	CARDINAL
fuelectenerg-900	476	1	50 k	QUANTITY
fuelectenerg-900	476	2	above 1000	CARDINAL
fuelectenerg-900	476	3	103	CARDINAL
fuelectenerg-900	476	4	5 k	QUANTITY
fuelectenerg-900	476	5	as high as 10000	CARDINAL
fuelectenerg-900	477	1	105	CARDINAL
fuelectenerg-900	478	1	98	CARDINAL
fuelectenerg-900	480	1	103	CARDINAL
fuelectenerg-900	481	1	10	CARDINAL
fuelectenerg-900	482	1	105	CARDINAL
fuelectenerg-900	483	1	105	CARDINAL
fuelectenerg-900	484	1	3	CARDINAL
fuelectenerg-900	484	2	m	ORG
fuelectenerg-900	484	3	1.1	CARDINAL
fuelectenerg-900	484	4	m	ORG
fuelectenerg-900	484	5	30	CARDINAL
fuelectenerg-900	484	6	7v	GPE
fuelectenerg-900	484	7	105	CARDINAL
fuelectenerg-900	485	1	400%	PERCENT
fuelectenerg-900	485	2	105	CARDINAL
fuelectenerg-900	487	1	98	CARDINAL
fuelectenerg-900	488	1	gaas nems	PERSON
fuelectenerg-900	488	2	98	CARDINAL
fuelectenerg-900	489	1	368	CARDINAL
fuelectenerg-900	489	2	i. jokić	PERSON
fuelectenerg-900	489	3	m. frantlović	PERSON
fuelectenerg-900	489	4	z. djurić	PERSON
fuelectenerg-900	489	5	m. l. dukić	PERSON
fuelectenerg-900	490	1	68	CARDINAL
fuelectenerg-900	490	2	as much as 14%	PERCENT
fuelectenerg-900	492	1	52.2	CARDINAL
fuelectenerg-900	492	2	4	CARDINAL
fuelectenerg-900	492	3	m	ORG
fuelectenerg-900	493	1	first	ORDINAL
fuelectenerg-900	494	1	68	CARDINAL
fuelectenerg-900	494	2	first	ORDINAL
fuelectenerg-900	495	1	105	CARDINAL
fuelectenerg-900	497	1	105	CARDINAL
fuelectenerg-900	499	1	nems devices	ORG
fuelectenerg-900	506	1	107	CARDINAL
fuelectenerg-900	509	1	369 3	DATE
fuelectenerg-900	509	2	nems components	ORG
fuelectenerg-900	510	1	johnson	PERSON
fuelectenerg-900	511	1	108	CARDINAL
fuelectenerg-900	516	1	109	CARDINAL
fuelectenerg-900	519	1	108	CARDINAL
fuelectenerg-900	519	2	110	CARDINAL
fuelectenerg-900	520	1	113	CARDINAL
fuelectenerg-900	520	2	115	CARDINAL
fuelectenerg-900	521	1	3.1	CARDINAL
fuelectenerg-900	523	1	1	CARDINAL
fuelectenerg-900	523	2	dbc	ORG
fuelectenerg-900	523	3	123	CARDINAL
fuelectenerg-900	523	4	370	CARDINAL
fuelectenerg-900	523	5	i. jokić	PERSON
fuelectenerg-900	523	6	m. frantlović	PERSON
fuelectenerg-900	523	7	z. djurić	PERSON
fuelectenerg-900	523	8	m. l. dukić	PERSON
fuelectenerg-900	523	9	2	CARDINAL
fuelectenerg-900	524	1	10log	CARDINAL
fuelectenerg-900	525	1		GPE
fuelectenerg-900	525	2	6	CARDINAL
fuelectenerg-900	525	3	sδν(	PERSON
fuelectenerg-900	527	1	langevin	PERSON
fuelectenerg-900	527	2	inieniei nnnrnnngdtdn ξ),	PERSON
fuelectenerg-900	527	3	2121 	QUANTITY
fuelectenerg-900	527	4	7	CARDINAL
fuelectenerg-900	528	1	113	CARDINAL
fuelectenerg-900	528	2	115	CARDINAL
fuelectenerg-900	528	3	120	CARDINAL
fuelectenerg-900	528	4	121	CARDINAL
fuelectenerg-900	530	1	115	CARDINAL
fuelectenerg-900	530	2	116	CARDINAL
fuelectenerg-900	530	3	117	CARDINAL
fuelectenerg-900	530	4	120	CARDINAL
fuelectenerg-900	530	5	121	CARDINAL
fuelectenerg-900	530	6	118	CARDINAL
fuelectenerg-900	532	1	ninie	GPE
fuelectenerg-900	532	2	eqs	ORG
fuelectenerg-900	532	3	7	CARDINAL
fuelectenerg-900	533	1		PERSON
fuelectenerg-900	533	2	9	CARDINAL
fuelectenerg-900	533	3	nn	GPE
fuelectenerg-900	533	4	n=[n1 n2	PERSON
fuelectenerg-900	534	1	ne=[n1e	GPE
fuelectenerg-900	534	2	nie	GPE
fuelectenerg-900	535	1	nn	GPE
fuelectenerg-900	535	2	1	CARDINAL
fuelectenerg-900	535	3	1	CARDINAL
fuelectenerg-900	536	1	 iksiks	PERSON
fuelectenerg-900	536	2	10	CARDINAL
fuelectenerg-900	537	1	119	CARDINAL
fuelectenerg-900	538	1	124	CARDINAL
fuelectenerg-900	538	2	4gie(n1e, n2e	DATE
fuelectenerg-900	539	1	i	EVENT
fuelectenerg-900	539	2	nn	GPE
fuelectenerg-900	540	1	nn	GPE
fuelectenerg-900	540	2	371	CARDINAL
fuelectenerg-900	542	1	2,nms	CARDINAL
fuelectenerg-900	542	2	11	CARDINAL
fuelectenerg-900	544	1		GPE
fuelectenerg-900	544	2		GPE
fuelectenerg-900	545	1		NORP
fuelectenerg-900	546	1		GPE
fuelectenerg-900	547	1		GPE
fuelectenerg-900	549	1		GPE
fuelectenerg-900	549	2		GPE
fuelectenerg-900	550	1		NORP
fuelectenerg-900	554	1	12	CARDINAL
fuelectenerg-900	556	1	6	CARDINAL
fuelectenerg-900	557	1	11	CARDINAL
fuelectenerg-900	557	2	12	CARDINAL
fuelectenerg-900	559	1	113	CARDINAL
fuelectenerg-900	559	2	115	CARDINAL
fuelectenerg-900	559	3	123	CARDINAL
fuelectenerg-900	559	4	2	CARDINAL
fuelectenerg-900	559	5	111	CARDINAL
fuelectenerg-900	559	6	2 1 1	DATE
fuelectenerg-900	559	7	13	CARDINAL
fuelectenerg-900	561	1	13	CARDINAL
fuelectenerg-900	562	1	118	CARDINAL
fuelectenerg-900	563	1	118	CARDINAL
fuelectenerg-900	564	1	two	CARDINAL
fuelectenerg-900	564	2	116	CARDINAL
fuelectenerg-900	564	3	117	CARDINAL
fuelectenerg-900	564	4	4)ω	CARDINAL
fuelectenerg-900	564	5	2	CARDINAL
fuelectenerg-900	564	6	14	CARDINAL
fuelectenerg-900	564	7	2	CARDINAL
fuelectenerg-900	565	1	1/2	CARDINAL
fuelectenerg-900	565	2	-1	ORG
fuelectenerg-900	565	3	2	CARDINAL
fuelectenerg-900	565	4	g1ee+m2	ORG
fuelectenerg-900	565	5	2 g2ee)[(m1k22m2k21	PERSON
fuelectenerg-900	565	6	2	CARDINAL
fuelectenerg-900	565	7	2	CARDINAL
fuelectenerg-900	566	1	two	CARDINAL
fuelectenerg-900	566	2	120	CARDINAL
fuelectenerg-900	567	1	3.2	CARDINAL
fuelectenerg-900	568	1	125	CARDINAL
fuelectenerg-900	568	2	372	CARDINAL
fuelectenerg-900	568	3	i. jokić	PERSON
fuelectenerg-900	568	4	m. frantlović	PERSON
fuelectenerg-900	568	5	z. djurić	PERSON
fuelectenerg-900	568	6	m. l. dukić	PERSON
fuelectenerg-900	569	1	125	CARDINAL
fuelectenerg-900	569	2	126	CARDINAL
fuelectenerg-900	570	1	a0	ORG
fuelectenerg-900	570	2	125	CARDINAL
fuelectenerg-900	570	3	(t	ORG
fuelectenerg-900	573	1	dbc	ORG
fuelectenerg-900	573	2	125	CARDINAL
fuelectenerg-900	574	1	15	CARDINAL
fuelectenerg-900	575	1	2	CARDINAL
fuelectenerg-900	575	2	16	CARDINAL
fuelectenerg-900	575	3	2	CARDINAL
fuelectenerg-900	576	1	125	CARDINAL
fuelectenerg-900	577	1	(t	ORG
fuelectenerg-900	577	2	2	ORG
fuelectenerg-900	577	3	125	CARDINAL
fuelectenerg-900	577	4	127	CARDINAL
fuelectenerg-900	577	5	ν	NORP
fuelectenerg-900	577	6	17	CARDINAL
fuelectenerg-900	579	1	2	CARDINAL
fuelectenerg-900	579	2	2	CARDINAL
fuelectenerg-900	579	3	125	CARDINAL
fuelectenerg-900	579	4	126	CARDINAL
fuelectenerg-900	581	1	17	CARDINAL
fuelectenerg-900	581	2	2	CARDINAL
fuelectenerg-900	581	3	sf()=(f0/2	CARDINAL
fuelectenerg-900	581	4	2	CARDINAL
fuelectenerg-900	582	1	12	CARDINAL
fuelectenerg-900	583	1	2	CARDINAL
fuelectenerg-900	583	2	eqs	ORG
fuelectenerg-900	584	1	13	CARDINAL
fuelectenerg-900	584	2	17	CARDINAL
fuelectenerg-900	585	1	122	CARDINAL
fuelectenerg-900	586	1	2	CARDINAL
fuelectenerg-900	586	2	22	CARDINAL
fuelectenerg-900	587	1	2/)]1(ττ[)τ(σ 1τ	CARDINAL
fuelectenerg-900	587	2	1 2	CARDINAL
fuelectenerg-900	587	3		NORP
fuelectenerg-900	587	4	18	CARDINAL
fuelectenerg-900	587	5	2	CARDINAL
fuelectenerg-900	587	6	f0/2	CARDINAL
fuelectenerg-900	587	7	2	CARDINAL
fuelectenerg-900	590	1	s,b(	ORG
fuelectenerg-900	590	2	eqs	ORG
fuelectenerg-900	591	1	16	CARDINAL
fuelectenerg-900	591	2	18	CARDINAL
fuelectenerg-900	592	1	373	CARDINAL
fuelectenerg-900	594	1	15	CARDINAL
fuelectenerg-900	595	1	lorentzian	NORP
fuelectenerg-900	595	2	122	CARDINAL
fuelectenerg-900	603	1	1	CARDINAL
fuelectenerg-900	603	2	az	GPE
fuelectenerg-900	604	1	19	CARDINAL
fuelectenerg-900	604	2	ω=2π. 3.3	DATE
fuelectenerg-900	605	1	50	CARDINAL
fuelectenerg-900	605	2	-16 kg	PERSON
fuelectenerg-900	605	3	-12 m	PRODUCT
fuelectenerg-900	605	4	2	CARDINAL
fuelectenerg-900	606	1	fig	ORG
fuelectenerg-900	607	1	7a	CARDINAL
fuelectenerg-900	607	2	lr()=10log(0.5(f0/2	PRODUCT
fuelectenerg-900	607	3	2	CARDINAL
fuelectenerg-900	608	1	123	CARDINAL
fuelectenerg-900	609	1	123	CARDINAL
fuelectenerg-900	614	1	115	CARDINAL
fuelectenerg-900	614	2	123	CARDINAL
fuelectenerg-900	617	1	7b	CARDINAL
fuelectenerg-900	618	1	two	CARDINAL
fuelectenerg-900	619	1	7c	CARDINAL
fuelectenerg-900	619	2	1	CARDINAL
fuelectenerg-900	619	3	2	CARDINAL
fuelectenerg-900	619	4	3	CARDINAL
fuelectenerg-900	621	1	116	CARDINAL
fuelectenerg-900	621	2	117	CARDINAL
fuelectenerg-900	621	3	two	CARDINAL
fuelectenerg-900	621	4	one	CARDINAL
fuelectenerg-900	624	1	122	CARDINAL
fuelectenerg-900	625	1	7d	CARDINAL
fuelectenerg-900	626	1	7a	CARDINAL
fuelectenerg-900	627	1	one	CARDINAL
fuelectenerg-900	628	1	first	ORDINAL
fuelectenerg-900	628	2	374	CARDINAL
fuelectenerg-900	628	3	i. jokić	PERSON
fuelectenerg-900	628	4	m. frantlović	PERSON
fuelectenerg-900	628	5	z. djurić	PERSON
fuelectenerg-900	628	6	m. l. dukić	PERSON
fuelectenerg-900	629	1	two	CARDINAL
fuelectenerg-900	629	2	s,b(	ORG
fuelectenerg-900	629	3	three	CARDINAL
fuelectenerg-900	630	1	15	CARDINAL
fuelectenerg-900	632	1	fig	ORG
fuelectenerg-900	633	1	7	CARDINAL
fuelectenerg-900	633	2	f0=50	ORG
fuelectenerg-900	633	3	two	CARDINAL
fuelectenerg-900	633	4	1	CARDINAL
fuelectenerg-900	633	5	2	CARDINAL
fuelectenerg-900	633	6	3	CARDINAL
fuelectenerg-900	633	7	19	CARDINAL
fuelectenerg-900	633	8	4	CARDINAL
fuelectenerg-900	634	1	375	CARDINAL
fuelectenerg-900	636	1	the year 2000	DATE
fuelectenerg-900	637	1	2d	DATE
fuelectenerg-900	641	1	nems components	ORG
fuelectenerg-900	648	1	the serbian ministry of education	ORG
fuelectenerg-900	648	2	32008	DATE
fuelectenerg-900	648	3	the serbian academy of sciences	ORG
fuelectenerg-900	650	1	dr.	PERSON
fuelectenerg-900	650	2	gradimir milovanović	PERSON
fuelectenerg-900	650	3	the serbian academy of sciences and arts	ORG
fuelectenerg-900	651	1	1	CARDINAL
fuelectenerg-900	651	2	j. basu	PERSON
fuelectenerg-900	651	3	t. k. bhattacharyya	PERSON
fuelectenerg-900	651	4	17	CARDINAL
fuelectenerg-900	652	1	1557-1580, 2011	DATE
fuelectenerg-900	653	1	2	CARDINAL
fuelectenerg-900	653	2	b. kim	PERSON
fuelectenerg-900	653	3	m. a. hopcroft	PERSON
fuelectenerg-900	653	4	r. n. candler	PERSON
fuelectenerg-900	653	5	devices & manu-facturability	ORG
fuelectenerg-900	653	6	a. b. kaul	PERSON
fuelectenerg-900	653	7	crc press	ORG
fuelectenerg-900	653	8	2012	DATE
fuelectenerg-900	654	1	79	CARDINAL
fuelectenerg-900	655	1	3	CARDINAL
fuelectenerg-900	655	2	j. t. m. van beek	PERSON
fuelectenerg-900	655	3	r. puers	PERSON
fuelectenerg-900	655	4	j. micromech	PERSON
fuelectenerg-900	656	1	microeng	GPE
fuelectenerg-900	657	1	22	DATE
fuelectenerg-900	658	1	013001 1-35, 2012	DATE
fuelectenerg-900	659	1	376	CARDINAL
fuelectenerg-900	659	2	i. jokić	PERSON
fuelectenerg-900	659	3	m. frantlović	PERSON
fuelectenerg-900	659	4	z. djurić	PERSON
fuelectenerg-900	659	5	m. l. dukić	PERSON
fuelectenerg-900	660	1	4	CARDINAL
fuelectenerg-900	661	1	nguyen	PERSON
fuelectenerg-900	661	2	spie	ORG
fuelectenerg-900	661	3	5715	DATE
fuelectenerg-900	661	4	2005	DATE
fuelectenerg-900	661	5	san jose	GPE
fuelectenerg-900	661	6	california	GPE
fuelectenerg-900	661	7	2005	DATE
fuelectenerg-900	662	1	11	CARDINAL
fuelectenerg-900	663	1	5	CARDINAL
fuelectenerg-900	663	2	d. e. serrano	PERSON
fuelectenerg-900	663	3	r. tabrizian	PERSON
fuelectenerg-900	663	4	f. ayazi	PERSON
fuelectenerg-900	663	5	european	NORP
fuelectenerg-900	663	6	fcs	GPE
fuelectenerg-900	663	7	san fransisco	GPE
fuelectenerg-900	663	8	2011	DATE
fuelectenerg-900	664	1	1-4	CARDINAL
fuelectenerg-900	665	1	6	CARDINAL
fuelectenerg-900	665	2	i. voiculescu	PERSON
fuelectenerg-900	665	3	a. n. nordin	PERSON
fuelectenerg-900	665	4	n. islam	PERSON
fuelectenerg-900	665	5	ed.	PERSON
fuelectenerg-900	665	6	intech	ORG
fuelectenerg-900	665	7	2012	DATE
fuelectenerg-900	665	8	chapter 4	LAW
fuelectenerg-900	666	1	65-86	DATE
fuelectenerg-900	667	1	7	CARDINAL
fuelectenerg-900	667	2	r. tabrizian	PERSON
fuelectenerg-900	667	3	m. rais-zadeh	PERSON
fuelectenerg-900	667	4	f. ayazi	PERSON
fuelectenerg-900	667	5	2009	DATE
fuelectenerg-900	667	6	denver	GPE
fuelectenerg-900	667	7	2009	DATE
fuelectenerg-900	667	8	2131–2134	CARDINAL
fuelectenerg-900	668	1	8	CARDINAL
fuelectenerg-900	668	2	c. zuo	PERSON
fuelectenerg-900	668	3	j. van der spiegel	PERSON
fuelectenerg-900	668	4	g. piazza	PERSON
fuelectenerg-900	668	5	1.05-ghz	MONEY
fuelectenerg-900	670	1	ferroelectr	PERSON
fuelectenerg-900	671	1	57	DATE
fuelectenerg-900	672	1	82-87, 2010	DATE
fuelectenerg-900	673	1	9	CARDINAL
fuelectenerg-900	673	2	g. piazza	PERSON
fuelectenerg-900	673	3	j. stephanou	PERSON
fuelectenerg-900	673	4	j. m. porter	PERSON
fuelectenerg-900	673	5	m. b. j. wijesundara	PERSON
fuelectenerg-900	673	6	a. p. pisano	PERSON
fuelectenerg-900	673	7	18th	ORDINAL
fuelectenerg-900	673	8	2005	DATE
fuelectenerg-900	673	9	2005	DATE
fuelectenerg-900	673	10	20-23	CARDINAL
fuelectenerg-900	674	1	10	CARDINAL
fuelectenerg-900	674	2	m. rinaldi	PERSON
fuelectenerg-900	674	3	c. zuniga	PERSON
fuelectenerg-900	674	4	g. piazza	PERSON
fuelectenerg-900	674	5	5	CARDINAL
fuelectenerg-900	674	6	22nd	DATE
fuelectenerg-900	674	7	2009	DATE
fuelectenerg-900	674	8	2009	DATE
fuelectenerg-900	675	1	916-919	CARDINAL
fuelectenerg-900	676	1	11	CARDINAL
fuelectenerg-900	676	2	h. m. lavasani	PERSON
fuelectenerg-900	676	3	b. harrington	PERSON
fuelectenerg-900	676	4	r. abdolvand	GPE
fuelectenerg-900	676	5	f. ayazi	PERSON
fuelectenerg-900	676	6	76	CARDINAL
fuelectenerg-900	676	7	1.7	CARDINAL
fuelectenerg-900	676	8	0.18 μm	QUANTITY
fuelectenerg-900	676	9	46	DATE
fuelectenerg-900	677	1	224-235	CARDINAL
fuelectenerg-900	677	2	jan 2011	DATE
fuelectenerg-900	678	1	12	CARDINAL
fuelectenerg-900	679	1	chen	PERSON
fuelectenerg-900	679	2	w. fang	PERSON
fuelectenerg-900	680	1	li	PERSON
fuelectenerg-900	680	2	24th	ORDINAL
fuelectenerg-900	680	3	2011	DATE
fuelectenerg-900	680	4	2011	DATE
fuelectenerg-900	681	1	784-787	CARDINAL
fuelectenerg-900	682	1	13	CARDINAL
fuelectenerg-900	682	2	g. k. ho	PERSON
fuelectenerg-900	682	3	k. sundaresan	PERSON
fuelectenerg-900	682	4	s. pourkamali	PERSON
fuelectenerg-900	682	5	f. ayazi	PERSON
fuelectenerg-900	682	6	the ieee micro	ORG
fuelectenerg-900	682	7	miami	GPE
fuelectenerg-900	682	8	fl	GPE
fuelectenerg-900	682	9	2005	DATE
fuelectenerg-900	683	1	116	CARDINAL
fuelectenerg-900	684	1	14	CARDINAL
fuelectenerg-900	684	2	h. g. barrow	PERSON
fuelectenerg-900	684	3	t. l. naing	PERSON
fuelectenerg-900	684	4	r. a. schneider	PERSON
fuelectenerg-900	684	5	t. o. rocheleau	PERSON
fuelectenerg-900	684	6	yeh	PERSON
fuelectenerg-900	684	7	z. ren	PERSON
fuelectenerg-900	685	1	nguyen	PERSON
fuelectenerg-900	685	2	0.0154-mm2 micromechanical	QUANTITY
fuelectenerg-900	686	1	baltimore	GPE
fuelectenerg-900	686	2	md	GPE
fuelectenerg-900	686	3	2012	DATE
fuelectenerg-900	687	1	1-6	CARDINAL
fuelectenerg-900	688	1	15	CARDINAL
fuelectenerg-900	688	2	z. hao	PERSON
fuelectenerg-900	688	3	s. pourkamali	PERSON
fuelectenerg-900	688	4	f. ayazi	PERSON
fuelectenerg-900	688	5	vhf	ORG
fuelectenerg-900	688	6	j. microelectromech	PERSON
fuelectenerg-900	689	1	syst	PERSON
fuelectenerg-900	689	2	13	CARDINAL
fuelectenerg-900	690	1	1043–1053, 2004	DATE
fuelectenerg-900	691	1	16	CARDINAL
fuelectenerg-900	691	2	j. e. y. lee	PERSON
fuelectenerg-900	691	3	a. a. seshia	PERSON
fuelectenerg-900	691	4	5.4	CARDINAL
fuelectenerg-900	691	5	2 million	CARDINAL
fuelectenerg-900	691	6	156	CARDINAL
fuelectenerg-900	692	1	28–35	CARDINAL
fuelectenerg-900	692	2	2009	DATE
fuelectenerg-900	693	1	17	CARDINAL
fuelectenerg-900	693	2	j. wang	PERSON
fuelectenerg-900	693	3	j. e. butler	PERSON
fuelectenerg-900	693	4	t. feygelson	GPE
fuelectenerg-900	694	1	nguyen	PERSON
fuelectenerg-900	694	2	1.51-ghz	QUANTITY
fuelectenerg-900	694	3	17th	CARDINAL
fuelectenerg-900	694	4	maastricht	GPE
fuelectenerg-900	694	5	netherlands	GPE
fuelectenerg-900	694	6	2004	DATE
fuelectenerg-900	695	1	641-644	CARDINAL
fuelectenerg-900	696	1	18	CARDINAL
fuelectenerg-900	696	2	frederic	ORG
fuelectenerg-900	696	3	silicon carbide micro	ORG
fuelectenerg-900	696	4	phd thesis	PERSON
fuelectenerg-900	696	5	mcgill university	ORG
fuelectenerg-900	696	6	montreal	GPE
fuelectenerg-900	696	7	canada	GPE
fuelectenerg-900	696	8	2009	DATE
fuelectenerg-900	697	1	19	CARDINAL
fuelectenerg-900	697	2	k. wang	PERSON
fuelectenerg-900	698	1	wong	PERSON
fuelectenerg-900	698	2	c. t.-c.	PERSON
fuelectenerg-900	699	1	nguyen	PERSON
fuelectenerg-900	699	2	vhf free	ORG
fuelectenerg-900	699	3	asme j. microelectromech	PERSON
fuelectenerg-900	700	1	syst	PERSON
fuelectenerg-900	700	2	9	CARDINAL
fuelectenerg-900	701	1	347-360	CARDINAL
fuelectenerg-900	701	2	2000	DATE
fuelectenerg-900	702	1	20	CARDINAL
fuelectenerg-900	702	2	s. pourkamali	PERSON
fuelectenerg-900	702	3	f. ayazi	PERSON
fuelectenerg-900	702	4	vhf	ORG
fuelectenerg-900	702	5	12th	ORDINAL
fuelectenerg-900	702	6	03	CARDINAL
fuelectenerg-900	702	7	boston	GPE
fuelectenerg-900	702	8	2003	DATE
fuelectenerg-900	702	9	837-840	CARDINAL
fuelectenerg-900	703	1	21	CARDINAL
fuelectenerg-900	703	2	p. helin	PERSON
fuelectenerg-900	703	3	k. nakamura	PERSON
fuelectenerg-900	703	4	j. de coster	PERSON
fuelectenerg-900	703	5	b. guo	PERSON
fuelectenerg-900	703	6	l. haspeslagh	PERSON
fuelectenerg-900	703	7	k. onishi	PERSON
fuelectenerg-900	703	8	h. tilmans	PERSON
fuelectenerg-900	703	9	the ieee international electron devices meeting	ORG
fuelectenerg-900	703	10	san francisco	GPE
fuelectenerg-900	703	11	2010	DATE
fuelectenerg-900	704	1	154–157	CARDINAL
fuelectenerg-900	705	1	22	CARDINAL
fuelectenerg-900	705	2	t. j. cheng	PERSON
fuelectenerg-900	705	3	s. a. bhave	PERSON
fuelectenerg-900	706	1	10	CARDINAL
fuelectenerg-900	706	2	23rd	DATE
fuelectenerg-900	706	3	2010	DATE
fuelectenerg-900	706	4	wanchai	GPE
fuelectenerg-900	706	5	hong kong	GPE
fuelectenerg-900	706	6	2010	DATE
fuelectenerg-900	707	1	695-698	CARDINAL
fuelectenerg-900	708	1	377	CARDINAL
fuelectenerg-900	709	1	23	CARDINAL
fuelectenerg-900	709	2	t. mattila	PERSON
fuelectenerg-900	709	3	a. oja	PERSON
fuelectenerg-900	709	4	j. kiihamäki	PERSON
fuelectenerg-900	709	5	h. seppä	PERSON
fuelectenerg-900	709	6	25	DATE
fuelectenerg-900	710	1	173–175, 2004	DATE
fuelectenerg-900	711	1	24	CARDINAL
fuelectenerg-900	711	2	g. wu	PERSON
fuelectenerg-900	711	3	d. xu	PERSON
fuelectenerg-900	711	4	b. xiong	PERSON
fuelectenerg-900	711	5	y. wang	PERSON
fuelectenerg-900	711	6	j. micromech	PERSON
fuelectenerg-900	712	1	microeng	GPE
fuelectenerg-900	713	1	22	DATE
fuelectenerg-900	714	1	025020 1-8, 2012	DATE
fuelectenerg-900	715	1	25	CARDINAL
fuelectenerg-900	716	1	lin	PERSON
fuelectenerg-900	717	1	li	PERSON
fuelectenerg-900	717	2	z. ren	PERSON
fuelectenerg-900	718	1	nguyen	PERSON
fuelectenerg-900	718	2	the ieee international electron devices meeting	ORG
fuelectenerg-900	718	3	washington dc	GPE
fuelectenerg-900	718	4	2005	DATE
fuelectenerg-900	719	1	287	CARDINAL
fuelectenerg-900	720	1	26	CARDINAL
fuelectenerg-900	720	2	m. u. demirci	PERSON
fuelectenerg-900	720	3	m. a.	PERSON
fuelectenerg-900	721	1	nguyen	PERSON
fuelectenerg-900	721	2	12th	ORDINAL
fuelectenerg-900	721	3	boston	GPE
fuelectenerg-900	721	4	2003	DATE
fuelectenerg-900	723	1	27	CARDINAL
fuelectenerg-900	724	1	li	PERSON
fuelectenerg-900	725	1	lin	PERSON
fuelectenerg-900	725	2	y. xie	PERSON
fuelectenerg-900	725	3	z. ren	PERSON
fuelectenerg-900	726	1	nguyen	PERSON
fuelectenerg-900	726	2	17th	CARDINAL
fuelectenerg-900	726	3	2004	DATE
fuelectenerg-900	726	4	2004	DATE
fuelectenerg-900	727	1	821-824	CARDINAL
fuelectenerg-900	728	1	28	CARDINAL
fuelectenerg-900	728	2	l. m. a. pascal	PERSON
fuelectenerg-900	728	3	b. a. myers	PERSON
fuelectenerg-900	728	4	p. lauria	PERSON
fuelectenerg-900	728	5	a. c. bleszynski jayich	PERSON
fuelectenerg-900	730	1	lett.	PERSON
fuelectenerg-900	731	1	101	CARDINAL
fuelectenerg-900	732	1	163505 1-4, 2012	DATE
fuelectenerg-900	733	1	29	CARDINAL
fuelectenerg-900	733	2	j. e.-y	PERSON
fuelectenerg-900	734	1	lee	PERSON
fuelectenerg-900	734	2	a. a. seshia	PERSON
fuelectenerg-900	734	3	4 million	CARDINAL
fuelectenerg-900	734	4	7th	ORDINAL
fuelectenerg-900	734	5	lecce	PERSON
fuelectenerg-900	734	6	italy	GPE
fuelectenerg-900	735	1	1257–1260, 2008	DATE
fuelectenerg-900	736	1	30	CARDINAL
fuelectenerg-900	736	2	d. weinstein	PERSON
fuelectenerg-900	736	3	s. a. bhave	PERSON
fuelectenerg-900	736	4	j. microelectromech	PERSON
fuelectenerg-900	737	1	syst	PERSON
fuelectenerg-900	737	2	18	CARDINAL
fuelectenerg-900	738	1	1401–1408, 2009	DATE
fuelectenerg-900	739	1	31	CARDINAL
fuelectenerg-900	739	2	r. henry	PERSON
fuelectenerg-900	739	3	d. kenny	PERSON
fuelectenerg-900	739	4	honolulu	GPE
fuelectenerg-900	739	5	2008	DATE
fuelectenerg-900	740	1	396–401	CARDINAL
fuelectenerg-900	741	1	32	CARDINAL
fuelectenerg-900	741	2	j. l. lopez	PERSON
fuelectenerg-900	741	3	j. verd	PERSON
fuelectenerg-900	741	4	j. teva	PERSON
fuelectenerg-900	741	5	g. murillo	PERSON
fuelectenerg-900	741	6	j. giner	PERSON
fuelectenerg-900	741	7	f. torres	PERSON
fuelectenerg-900	741	8	a. uranga	PERSON
fuelectenerg-900	741	9	g. abadal	PERSON
fuelectenerg-900	741	10	n. barniol	PERSON
fuelectenerg-900	741	11	j. micromech	PERSON
fuelectenerg-900	742	1	microeng	GPE
fuelectenerg-900	742	2	19	DATE
fuelectenerg-900	742	3	015002	DATE
fuelectenerg-900	743	1	1-10	CARDINAL
fuelectenerg-900	744	1	33	CARDINAL
fuelectenerg-900	744	2	a. n. nordin	PERSON
fuelectenerg-900	744	3	m. e. zaghloul	PERSON
fuelectenerg-900	745	1	55	DATE
fuelectenerg-900	746	1	992-1001	DATE
fuelectenerg-900	746	2	2007	DATE
fuelectenerg-900	747	1	34	CARDINAL
fuelectenerg-900	747	2	h. campanella	PERSON
fuelectenerg-900	747	3	e. cabruja	PERSON
fuelectenerg-900	747	4	j. montserrat	PERSON
fuelectenerg-900	747	5	a. uranga	PERSON
fuelectenerg-900	747	6	n. barniol	PERSON
fuelectenerg-900	747	7	j. esteve	PERSON
fuelectenerg-900	747	8	29	CARDINAL
fuelectenerg-900	748	1	28-30, 2008	DATE
fuelectenerg-900	749	1	35	CARDINAL
fuelectenerg-900	749	2	m. hara	PERSON
fuelectenerg-900	749	3	j. kuypers	PERSON
fuelectenerg-900	749	4	t. abe	PERSON
fuelectenerg-900	749	5	m. esashi	PERSON
fuelectenerg-900	749	6	2	CARDINAL
fuelectenerg-900	749	7	philadelphia	GPE
fuelectenerg-900	749	8	pa	GPE
fuelectenerg-900	749	9	2003	DATE
fuelectenerg-900	750	1	3	CARDINAL
fuelectenerg-900	751	1	1797-1800	DATE
fuelectenerg-900	752	1	36	CARDINAL
fuelectenerg-900	753	1	j. m. rabaey	PERSON
fuelectenerg-900	753	2	300-w	CARDINAL
fuelectenerg-900	753	3	1.9-ghz	QUANTITY
fuelectenerg-900	753	4	j. solid-state	PERSON
fuelectenerg-900	754	1	38	DATE
fuelectenerg-900	755	1	1271-1274	CARDINAL
fuelectenerg-900	755	2	2003	DATE
fuelectenerg-900	756	1	37	CARDINAL
fuelectenerg-900	756	2	j. s. wang	PERSON
fuelectenerg-900	756	3	k. m. lakin	PERSON
fuelectenerg-900	756	4	chicago	GPE
fuelectenerg-900	756	5	il, 1981	ORG
fuelectenerg-900	757	1	502-505	CARDINAL
fuelectenerg-900	758	1	38	CARDINAL
fuelectenerg-900	758	2	m. a. dubois	PERSON
fuelectenerg-900	758	3	j. f. carpentier p. vincent	PERSON
fuelectenerg-900	758	4	c. billard	PERSON
fuelectenerg-900	758	5	g. parat	PERSON
fuelectenerg-900	758	6	c. muller	PERSON
fuelectenerg-900	758	7	p. ancey	PERSON
fuelectenerg-900	758	8	p. conti	PERSON
fuelectenerg-900	758	9	j. solid-state	PERSON
fuelectenerg-900	758	10	41	CARDINAL
fuelectenerg-900	759	1	7–16, 2006	DATE
fuelectenerg-900	760	1	39	CARDINAL
fuelectenerg-900	760	2	b. p. harrington	PERSON
fuelectenerg-900	760	3	m. shahmohammadi	PERSON
fuelectenerg-900	760	4	r. abdolvand	PERSON
fuelectenerg-900	760	5	23rd	DATE
fuelectenerg-900	760	6	wanchai	GPE
fuelectenerg-900	760	7	hong kong	GPE
fuelectenerg-900	760	8	2010	DATE
fuelectenerg-900	761	1	707-710	QUANTITY
fuelectenerg-900	762	1	40	CARDINAL
fuelectenerg-900	762	2	l. khine	PERSON
fuelectenerg-900	762	3	phd	PERSON
fuelectenerg-900	763	1	national university of singapore	ORG
fuelectenerg-900	763	2	2010	DATE
fuelectenerg-900	764	1	41	CARDINAL
fuelectenerg-900	764	2	j. wang	PERSON
fuelectenerg-900	764	3	z. ren	PERSON
fuelectenerg-900	765	1	nguyen	PERSON
fuelectenerg-900	765	2	1.156-ghz	MONEY
fuelectenerg-900	769	1	51	DATE
fuelectenerg-900	770	1	2004	DATE
fuelectenerg-900	771	1	42	CARDINAL
fuelectenerg-900	771	2	k. sundaresan	PERSON
fuelectenerg-900	771	3	g. k. ho	PERSON
fuelectenerg-900	771	4	s. pourkamali	PERSON
fuelectenerg-900	771	5	f. ayazi	PERSON
fuelectenerg-900	771	6	j. solid-state	PERSON
fuelectenerg-900	771	7	42	DATE
fuelectenerg-900	771	8	1425–1434, 2007	DATE
fuelectenerg-900	772	1	43	CARDINAL
fuelectenerg-900	772	2	j. salvia	PERSON
fuelectenerg-900	772	3	m. messana	PERSON
fuelectenerg-900	772	4	m. ohline	PERSON
fuelectenerg-900	772	5	m. a. hopcroft	PERSON
fuelectenerg-900	772	6	r. melamud	PERSON
fuelectenerg-900	772	7	s. chandorkar	PERSON
fuelectenerg-900	772	8	h. k. lee	PERSON
fuelectenerg-900	772	9	g. bahl	PERSON
fuelectenerg-900	772	10	b. murmann	PERSON
fuelectenerg-900	772	11	t. w. kenny	PERSON
fuelectenerg-900	772	12	san francisco	GPE
fuelectenerg-900	772	13	2008	DATE
fuelectenerg-900	773	1	1-4	CARDINAL
fuelectenerg-900	773	2	378	CARDINAL
fuelectenerg-900	773	3	i. jokić	PERSON
fuelectenerg-900	773	4	m. frantlović	PERSON
fuelectenerg-900	773	5	z. djurić	PERSON
fuelectenerg-900	773	6	m. l. dukić	PERSON
fuelectenerg-900	774	1	44	CARDINAL
fuelectenerg-900	775	1	hsu	PERSON
fuelectenerg-900	775	2	c. t.-c.	PERSON
fuelectenerg-900	776	1	nguyen	PERSON
fuelectenerg-900	776	2	ieee international micro electro mechanical systems conference	ORG
fuelectenerg-900	776	3	las vegas	GPE
fuelectenerg-900	776	4	nevada	GPE
fuelectenerg-900	776	5	2002	DATE
fuelectenerg-900	777	1	731–734	CARDINAL
fuelectenerg-900	778	1	45	CARDINAL
fuelectenerg-900	778	2	a. k. samarao	PERSON
fuelectenerg-900	778	3	f. ayazi	PERSON
fuelectenerg-900	779	1	baltimore	GPE
fuelectenerg-900	779	2	2009	DATE
fuelectenerg-900	780	1	1–4	CARDINAL
fuelectenerg-900	781	1	46	CARDINAL
fuelectenerg-900	781	2	a. k. samarao	PERSON
fuelectenerg-900	781	3	f. ayazi	PERSON
fuelectenerg-900	781	4	23nd	ORDINAL
fuelectenerg-900	781	5	hong kong	GPE
fuelectenerg-900	781	6	2010	DATE
fuelectenerg-900	782	1	116–119	CARDINAL
fuelectenerg-900	783	1	47	CARDINAL
fuelectenerg-900	783	2	r. melamud	PERSON
fuelectenerg-900	783	3	s. a. chandorkar	PERSON
fuelectenerg-900	783	4	k. bongsang	PERSON
fuelectenerg-900	783	5	h. k. lee	PERSON
fuelectenerg-900	783	6	j. c.	PERSON
fuelectenerg-900	783	7	g. bahl	PERSON
fuelectenerg-900	783	8	m. a. hopcroft	PERSON
fuelectenerg-900	783	9	t. w. kenny	PERSON
fuelectenerg-900	783	10	j. microelectromechanical systems	ORG
fuelectenerg-900	783	11	18	CARDINAL
fuelectenerg-900	784	1	1409–1419, 2009	DATE
fuelectenerg-900	785	1	48	CARDINAL
fuelectenerg-900	785	2	h. k. lee	PERSON
fuelectenerg-900	785	3	m. a. hopcroft	PERSON
fuelectenerg-900	785	4	r. k. melamud	PERSON
fuelectenerg-900	785	5	b. kim	PERSON
fuelectenerg-900	785	6	j. salvia	PERSON
fuelectenerg-900	785	7	s. chandorkar	PERSON
fuelectenerg-900	785	8	ž	ORG
fuelectenerg-900	785	9	t. w. kenny	PERSON
fuelectenerg-900	785	10	hilton head	PERSON
fuelectenerg-900	785	11	2008	DATE
fuelectenerg-900	786	1	48–51	CARDINAL
fuelectenerg-900	787	1	49	CARDINAL
fuelectenerg-900	787	2	j. h. seo	PERSON
fuelectenerg-900	787	3	k. s. demirci	PERSON
fuelectenerg-900	787	4	a. byun	PERSON
fuelectenerg-900	787	5	s. truax	PERSON
fuelectenerg-900	787	6	2007	DATE
fuelectenerg-900	787	7	2007	DATE
fuelectenerg-900	788	1	2457	CARDINAL
fuelectenerg-900	788	2	2360	CARDINAL
fuelectenerg-900	789	1	50	CARDINAL
fuelectenerg-900	789	2	h. wan-thai	PERSON
fuelectenerg-900	789	3	j. r. clark	PERSON
fuelectenerg-900	789	4	c. nguyen	PERSON
fuelectenerg-900	789	5	san francisco	GPE
fuelectenerg-900	789	6	2000	DATE
fuelectenerg-900	790	1	399-402	CARDINAL
fuelectenerg-900	791	1	51	CARDINAL
fuelectenerg-900	791	2	f. nabki	PERSON
fuelectenerg-900	791	3	t. a. dusatko	GPE
fuelectenerg-900	791	4	m. n. el-gamal	PERSON
fuelectenerg-900	791	5	san jose	GPE
fuelectenerg-900	791	6	2008	DATE
fuelectenerg-900	792	1	185-188	CARDINAL
fuelectenerg-900	793	1	52	CARDINAL
fuelectenerg-900	793	2	w. pang	PERSON
fuelectenerg-900	793	3	h. zhang	PERSON
fuelectenerg-900	793	4	h. yu	PERSON
fuelectenerg-900	794	1	lee	PERSON
fuelectenerg-900	794	2	e. s. kim	PERSON
fuelectenerg-900	794	3	j. microelectromechanical systems	ORG
fuelectenerg-900	794	4	16	CARDINAL
fuelectenerg-900	795	1	1303-1313	CARDINAL
fuelectenerg-900	795	2	2007	DATE
fuelectenerg-900	796	1	53	CARDINAL
fuelectenerg-900	796	2	m. lutz	PERSON
fuelectenerg-900	796	3	a. partridge	PERSON
fuelectenerg-900	796	4	p. gupta	PERSON
fuelectenerg-900	796	5	n. buchan	PERSON
fuelectenerg-900	796	6	e. klaassen	PERSON
fuelectenerg-900	796	7	j. mcdonald	PERSON
fuelectenerg-900	796	8	k. petersen	PERSON
fuelectenerg-900	796	9	14th	CARDINAL
fuelectenerg-900	796	10	2007	DATE
fuelectenerg-900	797	1	49–52	ORDINAL
fuelectenerg-900	798	1	54	CARDINAL
fuelectenerg-900	798	2	w. t. hsu	PERSON
fuelectenerg-900	798	3	miami	GPE
fuelectenerg-900	798	4	fl	ORG
fuelectenerg-900	798	5	2006	DATE
fuelectenerg-900	799	1	389–392	CARDINAL
fuelectenerg-900	800	1	55	CARDINAL
fuelectenerg-900	800	2	m. lutz	PERSON
fuelectenerg-900	800	3	j. mcdonald	PERSON
fuelectenerg-900	800	4	p. gupta	PERSON
fuelectenerg-900	800	5	a. partridge	PERSON
fuelectenerg-900	800	6	c. dimpel	PERSON
fuelectenerg-900	800	7	k. petersen	PERSON
fuelectenerg-900	800	8	j. valldorf	PERSON
fuelectenerg-900	800	9	w. gessner	PERSON
fuelectenerg-900	800	10	berlin	GPE
fuelectenerg-900	800	11	springer, 2007	DATE
fuelectenerg-900	801	1	279-289	CARDINAL
fuelectenerg-900	802	1	56	CARDINAL
fuelectenerg-900	802	2	w. lin	PERSON
fuelectenerg-900	802	3	s. lee	PERSON
fuelectenerg-900	802	4	z. ren	PERSON
fuelectenerg-900	803	1	nguyen	PERSON
fuelectenerg-900	803	2	washington	GPE
fuelectenerg-900	803	3	dc	GPE
fuelectenerg-900	803	4	2003	DATE
fuelectenerg-900	805	1	57	CARDINAL
fuelectenerg-900	805	2	jaakkola	GPE
fuelectenerg-900	805	3	j. kiihamaki	PERSON
fuelectenerg-900	805	4	j. karttunen	PERSON
fuelectenerg-900	805	5	a. oja	PERSON
fuelectenerg-900	805	6	h. seppa	PERSON
fuelectenerg-900	805	7	h. kattelus	PERSON
fuelectenerg-900	805	8	i. tittonen	PERSON
fuelectenerg-900	805	9	14	CARDINAL
fuelectenerg-900	806	1	97	CARDINAL
fuelectenerg-900	807	1	497-502	CARDINAL
fuelectenerg-900	807	2	2002	DATE
fuelectenerg-900	808	1	58	CARDINAL
fuelectenerg-900	808	2	m. sworowski	PERSON
fuelectenerg-900	808	3	f. neuilly	PERSON
fuelectenerg-900	808	4	b. legrand	GPE
fuelectenerg-900	808	5	a. summanwar	PERSON
fuelectenerg-900	808	6	l. buchaillot	PERSON
fuelectenerg-900	808	7	24	CARDINAL
fuelectenerg-900	808	8	31	DATE
fuelectenerg-900	808	9	23–25, 2010	DATE
fuelectenerg-900	809	1	59	CARDINAL
fuelectenerg-900	809	2	h. lavasani	PERSON
fuelectenerg-900	809	3	a. k. samarao	PERSON
fuelectenerg-900	809	4	f. ayazi	PERSON
fuelectenerg-900	809	5	145	CARDINAL
fuelectenerg-900	809	6	san francisco	GPE
fuelectenerg-900	809	7	2008	DATE
fuelectenerg-900	810	1	675–678	CARDINAL
fuelectenerg-900	811	1	60	CARDINAL
fuelectenerg-900	811	2	t. mattila	PERSON
fuelectenerg-900	811	3	j. kiihamoki	PERSON
fuelectenerg-900	811	4	a. oja	PERSON
fuelectenerg-900	811	5	i. tittonen	PERSON
fuelectenerg-900	811	6	h. seppa	PERSON
fuelectenerg-900	811	7	13th	ORDINAL
fuelectenerg-900	811	8	seoul	GPE
fuelectenerg-900	811	9	2005	DATE
fuelectenerg-900	811	10	2	CARDINAL
fuelectenerg-900	811	11	2135–2138	TIME
fuelectenerg-900	812	1	61	CARDINAL
fuelectenerg-900	812	2	m. akgul	PERSON
fuelectenerg-900	812	3	b. kim	PERSON
fuelectenerg-900	812	4	l. w. hung	PERSON
fuelectenerg-900	812	5	y. lin	PERSON
fuelectenerg-900	813	1	li	PERSON
fuelectenerg-900	814	1	huang	PERSON
fuelectenerg-900	814	2	i. gurin	PERSON
fuelectenerg-900	814	3	a. borna	PERSON
fuelectenerg-900	815	1	nguyen	PERSON
fuelectenerg-900	815	2	denver	GPE
fuelectenerg-900	815	3	2009	DATE
fuelectenerg-900	816	1	798–801	CARDINAL
fuelectenerg-900	817	1	62	CARDINAL
fuelectenerg-900	817	2	m. ziaei-moayyed	PERSON
fuelectenerg-900	817	3	j. hsieh	PERSON
fuelectenerg-900	818	1	p. chen	PERSON
fuelectenerg-900	818	2	e. p. quevy	PERSON
fuelectenerg-900	818	3	d. elata	GPE
fuelectenerg-900	818	4	r. t. howe	PERSON
fuelectenerg-900	818	5	379	CARDINAL
fuelectenerg-900	818	6	17th	ORDINAL
fuelectenerg-900	818	7	denver	GPE
fuelectenerg-900	818	8	2009	DATE
fuelectenerg-900	819	1	2338–2341	TIME
fuelectenerg-900	820	1	63	CARDINAL
fuelectenerg-900	820	2	t. mattila	PERSON
fuelectenerg-900	820	3	j. kiihamaki	PERSON
fuelectenerg-900	820	4	h. kattelus	PERSON
fuelectenerg-900	820	5	a. oja	PERSON
fuelectenerg-900	820	6	h. seppa	PERSON
fuelectenerg-900	820	7	12th	ORDINAL
fuelectenerg-900	820	8	boston	GPE
fuelectenerg-900	820	9	ma	GPE
fuelectenerg-900	820	10	2003	DATE
fuelectenerg-900	821	1	1574–1577	CARDINAL
fuelectenerg-900	822	1	64	CARDINAL
fuelectenerg-900	822	2	m. u. demirci	PERSON
fuelectenerg-900	822	3	c. nguyen	PERSON
fuelectenerg-900	822	4	15	CARDINAL
fuelectenerg-900	823	1	1419-1436	CARDINAL
fuelectenerg-900	823	2	dec. 2006	DATE
fuelectenerg-900	824	1	65	CARDINAL
fuelectenerg-900	825	1	nguyen	PERSON
fuelectenerg-900	829	1	54	DATE
fuelectenerg-900	830	1	251-270	CARDINAL
fuelectenerg-900	831	1	66	CARDINAL
fuelectenerg-900	831	2	y. t. yang	PERSON
fuelectenerg-900	831	3	k. l.	PERSON
fuelectenerg-900	831	4	x. m. h. huang	PERSON
fuelectenerg-900	831	5	l. m. schiavone	PERSON
fuelectenerg-900	831	6	m. l. roukes	PERSON
fuelectenerg-900	831	7	c. a. zorman	PERSON
fuelectenerg-900	831	8	m. mehregany	PERSON
fuelectenerg-900	833	1	lett.	PERSON
fuelectenerg-900	834	1	78	DATE
fuelectenerg-900	835	1	162-164	CARDINAL
fuelectenerg-900	836	1	67	CARDINAL
fuelectenerg-900	836	2	h. a. c. tilmans	PERSON
fuelectenerg-900	836	3	m. elwenspoek	PERSON
fuelectenerg-900	836	4	j. h. j. fluitman	PERSON
fuelectenerg-900	836	5	30	CARDINAL
fuelectenerg-900	837	1	35	CARDINAL
fuelectenerg-900	838	1	68	CARDINAL
fuelectenerg-900	838	2	c. chen	PERSON
fuelectenerg-900	838	3	s. lee	PERSON
fuelectenerg-900	838	4	v. v. deshpande	PERSON
fuelectenerg-900	839	1	lee	PERSON
fuelectenerg-900	839	2	m. lekas	PERSON
fuelectenerg-900	839	3	j. hone	PERSON
fuelectenerg-900	839	4	nat	DATE
fuelectenerg-900	840	1	nanotechnol	PERSON
fuelectenerg-900	840	2	8	CARDINAL
fuelectenerg-900	841	1	923-927	CARDINAL
fuelectenerg-900	841	2	2013	DATE
fuelectenerg-900	842	1	69	CARDINAL
fuelectenerg-900	842	2	a. n. cleland	PERSON
fuelectenerg-900	842	3	m. l. roukes	PERSON
fuelectenerg-900	844	1	lett.	PERSON
fuelectenerg-900	845	1	69	DATE
fuelectenerg-900	846	1	2653-2655, 1996	DATE
fuelectenerg-900	847	1	70	CARDINAL
fuelectenerg-900	847	2	k. l.	PERSON
fuelectenerg-900	847	3	m. l. roukes	PERSON
fuelectenerg-900	847	4	sci.	ORG
fuelectenerg-900	847	5	instrum	PERSON
fuelectenerg-900	848	1	76	DATE
fuelectenerg-900	849	1	061101	DATE
fuelectenerg-900	849	2	2005	DATE
fuelectenerg-900	850	1	71	CARDINAL
fuelectenerg-900	850	2	l. feng	PERSON
fuelectenerg-900	850	3	r. r.	PERSON
fuelectenerg-900	850	4	d. yang	PERSON
fuelectenerg-900	850	5	m. l. roukes	PERSON
fuelectenerg-900	850	6	7	CARDINAL
fuelectenerg-900	851	1	1953-1959	DATE
fuelectenerg-900	851	2	2007	DATE
fuelectenerg-900	852	1	72	CARDINAL
fuelectenerg-900	852	2	m. h. huang	PERSON
fuelectenerg-900	852	3	x. l. feng	PERSON
fuelectenerg-900	852	4	c. a. zorman	PERSON
fuelectenerg-900	852	5	m. mehregany	PERSON
fuelectenerg-900	852	6	m. l. roukes	PERSON
fuelectenerg-900	852	7	vhf	ORG
fuelectenerg-900	852	8	j. phys	ORG
fuelectenerg-900	853	1	7	CARDINAL
fuelectenerg-900	854	1	247 1-15, 2005	QUANTITY
fuelectenerg-900	855	1	73	CARDINAL
fuelectenerg-900	855	2	d. w. carr	PERSON
fuelectenerg-900	855	3	s. evoy	PERSON
fuelectenerg-900	855	4	l. sekaric	PERSON
fuelectenerg-900	855	5	h. g. craighead	PERSON
fuelectenerg-900	855	6	j. m. parpia	PERSON
fuelectenerg-900	857	1	lett.	PERSON
fuelectenerg-900	858	1	75	DATE
fuelectenerg-900	859	1	920-922	CARDINAL
fuelectenerg-900	859	2	1999	DATE
fuelectenerg-900	860	1	74	CARDINAL
fuelectenerg-900	860	2	m. h. huang	PERSON
fuelectenerg-900	860	3	c. a. zorman	PERSON
fuelectenerg-900	860	4	m. mehregany	PERSON
fuelectenerg-900	860	5	m. l. roukes	PERSON
fuelectenerg-900	860	6	421	CARDINAL
fuelectenerg-900	861	1	496	CARDINAL
fuelectenerg-900	861	2	2003	DATE
fuelectenerg-900	862	1	75	CARDINAL
fuelectenerg-900	862	2	a. n. cleland	PERSON
fuelectenerg-900	862	3	m. pophristic	PERSON
fuelectenerg-900	862	4	i. ferguson	PERSON
fuelectenerg-900	864	1	lett.	PERSON
fuelectenerg-900	864	2	79	DATE
fuelectenerg-900	865	1	2070-2072	CARDINAL
fuelectenerg-900	866	1	76	CARDINAL
fuelectenerg-900	866	2	j. m. parpia	PERSON
fuelectenerg-900	866	3	h. g. craighead	PERSON
fuelectenerg-900	866	4	t. feygelson	GPE
fuelectenerg-900	866	5	b. h. houston	PERSON
fuelectenerg-900	866	6	j. e. butler	PERSON
fuelectenerg-900	868	1	lett.	PERSON
fuelectenerg-900	868	2	81	DATE
fuelectenerg-900	869	1	4455-4457	DATE
fuelectenerg-900	869	2	2002	DATE
fuelectenerg-900	870	1	77	CARDINAL
fuelectenerg-900	870	2	r. b. karabalin	PERSON
fuelectenerg-900	870	3	m. h. matheny	PERSON
fuelectenerg-900	870	4	x. l. feng	PERSON
fuelectenerg-900	870	5	e. defaÿ	PERSON
fuelectenerg-900	870	6	g. le rhun	PERSON
fuelectenerg-900	870	7	c. marcoux	GPE
fuelectenerg-900	870	8	s. hentz	PERSON
fuelectenerg-900	870	9	m. l. roukes	PERSON
fuelectenerg-900	872	1	lett.	PERSON
fuelectenerg-900	872	2	95	CARDINAL
fuelectenerg-900	873	1	103111 1-3, 2009	DATE
fuelectenerg-900	874	1	78	CARDINAL
fuelectenerg-900	874	2	a. husain	PERSON
fuelectenerg-900	874	3	j. hone	PERSON
fuelectenerg-900	874	4	h. w. ch.	PERSON
fuelectenerg-900	874	5	postma	PERSON
fuelectenerg-900	874	6	x. m. h. huang	PERSON
fuelectenerg-900	874	7	t. drake	PERSON
fuelectenerg-900	874	8	m. barbic	PERSON
fuelectenerg-900	874	9	a. scherer	PERSON
fuelectenerg-900	874	10	m. l. roukes,"nanowire	PERSON
fuelectenerg-900	876	1	lett.	PERSON
fuelectenerg-900	876	2	83	DATE
fuelectenerg-900	877	1	1240-1242	CARDINAL
fuelectenerg-900	877	2	2003	DATE
fuelectenerg-900	878	1	79	CARDINAL
fuelectenerg-900	878	2	t. f. li	PERSON
fuelectenerg-900	878	3	y. pashkin	PERSON
fuelectenerg-900	878	4	o. astafiev	PERSON
fuelectenerg-900	878	5	y. nakamura	PERSON
fuelectenerg-900	878	6	j. s. tsai	PERSON
fuelectenerg-900	880	1	lett.	PERSON
fuelectenerg-900	881	1	92	CARDINAL
fuelectenerg-900	883	1	1-3, 2008	DATE
fuelectenerg-900	884	1	80	CARDINAL
fuelectenerg-900	884	2	n. a. melosh	PERSON
fuelectenerg-900	884	3	a. boukai	PERSON
fuelectenerg-900	884	4	f. diana	PERSON
fuelectenerg-900	884	5	b. gerardo	PERSON
fuelectenerg-900	884	6	a. badolato	PERSON
fuelectenerg-900	884	7	p. m. petroff	PERSON
fuelectenerg-900	884	8	j. r. heath	PERSON
fuelectenerg-900	885	1	300	CARDINAL
fuelectenerg-900	886	1	112-115	CARDINAL
fuelectenerg-900	886	2	2003	DATE
fuelectenerg-900	887	1	81	CARDINAL
fuelectenerg-900	887	2	l. feng	PERSON
fuelectenerg-900	887	3	m. h. matheny	PERSON
fuelectenerg-900	887	4	c. a. zorman	PERSON
fuelectenerg-900	887	5	m. mehregany	PERSON
fuelectenerg-900	887	6	m. l. roukes	PERSON
fuelectenerg-900	887	7	10	CARDINAL
fuelectenerg-900	887	8	28912896, 2010	DATE
fuelectenerg-900	888	1	82	CARDINAL
fuelectenerg-900	888	2	o. vazquez-mena	PERSON
fuelectenerg-900	888	3	g. villanueva	PERSON
fuelectenerg-900	888	4	v. savu	PERSON
fuelectenerg-900	888	5	k. sidler	PERSON
fuelectenerg-900	888	6	m. a. f. van den boogaart	PERSON
fuelectenerg-900	888	7	j. brugger	PERSON
fuelectenerg-900	888	8	8	CARDINAL
fuelectenerg-900	889	1	3675	CARDINAL
fuelectenerg-900	890	1	83	CARDINAL
fuelectenerg-900	890	2	r.	NORP
fuelectenerg-900	890	3	d. gao	PERSON
fuelectenerg-900	890	4	a. i. hochbaum	PERSON
fuelectenerg-900	890	5	c. carraro	PERSON
fuelectenerg-900	890	6	r. maboudian	PERSON
fuelectenerg-900	890	7	p. yang	PERSON
fuelectenerg-900	890	8	adv	ORG
fuelectenerg-900	890	9	17	CARDINAL
fuelectenerg-900	890	10	2098-2102	CARDINAL
fuelectenerg-900	891	1	84	CARDINAL
fuelectenerg-900	891	2	r. r.	PERSON
fuelectenerg-900	891	3	x. l. feng	PERSON
fuelectenerg-900	891	4	m. l.	PERSON
fuelectenerg-900	891	5	d. yang	PERSON
fuelectenerg-900	891	6	8	CARDINAL
fuelectenerg-900	891	7	1756-1761, 2008	DATE
fuelectenerg-900	892	1	85	CARDINAL
fuelectenerg-900	892	2	c. regal	PERSON
fuelectenerg-900	892	3	j. teufel	PERSON
fuelectenerg-900	892	4	k. lehnert	PERSON
fuelectenerg-900	892	5	nat	ORG
fuelectenerg-900	893	1	4	CARDINAL
fuelectenerg-900	894	1	555–560, 2008	DATE
fuelectenerg-900	895	1	380	CARDINAL
fuelectenerg-900	895	2	i. jokić	PERSON
fuelectenerg-900	895	3	m. frantlović	PERSON
fuelectenerg-900	895	4	z. djurić	PERSON
fuelectenerg-900	895	5	m. l. dukić	PERSON
fuelectenerg-900	896	1	86	CARDINAL
fuelectenerg-900	896	2	s. t. bartsch	PERSON
fuelectenerg-900	896	3	a. lovera	PERSON
fuelectenerg-900	896	4	d. grogg	PERSON
fuelectenerg-900	896	5	a. m. ionescu	PERSON
fuelectenerg-900	896	6	6	CARDINAL
fuelectenerg-900	897	1	256–264, 2012	DATE
fuelectenerg-900	898	1	87	CARDINAL
fuelectenerg-900	898	2	b. m. zwickl	PERSON
fuelectenerg-900	898	3	w. e. shanks	PERSON
fuelectenerg-900	898	4	a. m. jayich	PERSON
fuelectenerg-900	898	5	c. yang	GPE
fuelectenerg-900	898	6	a. c. bleszynski jayich	PERSON
fuelectenerg-900	898	7	j. d. thompson	PERSON
fuelectenerg-900	898	8	j. g. e. harris	PERSON
fuelectenerg-900	900	1	lett.	PERSON
fuelectenerg-900	901	1	92	CARDINAL
fuelectenerg-900	902	1	103125 1-3, 2008	DATE
fuelectenerg-900	903	1	88	CARDINAL
fuelectenerg-900	903	2	s. iijima	PERSON
fuelectenerg-900	903	3	354	CARDINAL
fuelectenerg-900	904	1	56	CARDINAL
fuelectenerg-900	905	1	89	CARDINAL
fuelectenerg-900	905	2	s. m. huang	PERSON
fuelectenerg-900	905	3	x. y. cai	PERSON
fuelectenerg-900	905	4	j. liu	PERSON
fuelectenerg-900	905	5	j. amer	PERSON
fuelectenerg-900	907	1	125	CARDINAL
fuelectenerg-900	908	1	5636-5637	DATE
fuelectenerg-900	908	2	2003	DATE
fuelectenerg-900	909	1	90	CARDINAL
fuelectenerg-900	909	2	h. w. zhu	PERSON
fuelectenerg-900	909	3	c. l. xu	PERSON
fuelectenerg-900	909	4	d. h. wu	PERSON
fuelectenerg-900	909	5	b. q. wei	PERSON
fuelectenerg-900	909	6	r. vajtai	PERSON
fuelectenerg-900	909	7	m. ajayan	PERSON
fuelectenerg-900	909	8	296	CARDINAL
fuelectenerg-900	909	9	884-886	CARDINAL
fuelectenerg-900	910	1	91	CARDINAL
fuelectenerg-900	910	2	z. l. wang	PERSON
fuelectenerg-900	910	3	d. ugarte	PERSON
fuelectenerg-900	910	4	w. a. de heer	PERSON
fuelectenerg-900	911	1	283	CARDINAL
fuelectenerg-900	912	1	1513-1516	CARDINAL
fuelectenerg-900	912	2	1999	DATE
fuelectenerg-900	913	1	92	CARDINAL
fuelectenerg-900	913	2	y. yaish	PERSON
fuelectenerg-900	913	3	h. üstünel	PERSON
fuelectenerg-900	913	4	d. roundy	PERSON
fuelectenerg-900	913	5	t. a. arias	PERSON
fuelectenerg-900	913	6	p. l. mceuen	PERSON
fuelectenerg-900	913	7	431	CARDINAL
fuelectenerg-900	913	8	284	CARDINAL
fuelectenerg-900	914	1	93	CARDINAL
fuelectenerg-900	914	2	phd	PERSON
fuelectenerg-900	915	1	thesis	PERSON
fuelectenerg-900	915	2	cornell university	ORG
fuelectenerg-900	915	3	2006	DATE
fuelectenerg-900	916	1	94	CARDINAL
fuelectenerg-900	916	2	h. b. peng	PERSON
fuelectenerg-900	916	3	c. w. chang	PERSON
fuelectenerg-900	916	4	s. aloni	PERSON
fuelectenerg-900	916	5	t. d. yuzvinsky	GPE
fuelectenerg-900	916	6	a. zettl	PERSON
fuelectenerg-900	917	1	lett.	PERSON
fuelectenerg-900	918	1	97	CARDINAL
fuelectenerg-900	919	1	087203	DATE
fuelectenerg-900	920	1	95	CARDINAL
fuelectenerg-900	920	2	d. garcia-sanchez	PERSON
fuelectenerg-900	920	3	a. san paulo	PERSON
fuelectenerg-900	920	4	m. j. esplandiu	PERSON
fuelectenerg-900	920	5	f. perez-murano	PERSON
fuelectenerg-900	920	6	l. forró	GPE
fuelectenerg-900	920	7	a. aguasca	PERSON
fuelectenerg-900	920	8	a. bachtold	PERSON
fuelectenerg-900	920	9	lett.	PERSON
fuelectenerg-900	921	1	99	CARDINAL
fuelectenerg-900	922	1	085501	DATE
fuelectenerg-900	923	1	96	CARDINAL
fuelectenerg-900	923	2	e. a. laird	PERSON
fuelectenerg-900	923	3	f. pei	PERSON
fuelectenerg-900	923	4	w. tang	PERSON
fuelectenerg-900	923	5	g. a. steele	PERSON
fuelectenerg-900	923	6	l. p. kouwenhoven	PERSON
fuelectenerg-900	923	7	39	CARDINAL
fuelectenerg-900	923	8	12	CARDINAL
fuelectenerg-900	924	1	193–197, 2011	DATE
fuelectenerg-900	925	1	97	CARDINAL
fuelectenerg-900	925	2	chung-chiang wu	ORG
fuelectenerg-900	925	3	phd	PERSON
fuelectenerg-900	926	1	university of michigan	ORG
fuelectenerg-900	926	2	2012	DATE
fuelectenerg-900	927	1	98	CARDINAL
fuelectenerg-900	927	2	m. imboden	PERSON
fuelectenerg-900	928	1	534	CARDINAL
fuelectenerg-900	929	1	2014	DATE
fuelectenerg-900	930	1	99	CARDINAL
fuelectenerg-900	930	2	d. garcia-sanchez	PERSON
fuelectenerg-900	930	3	a. aguasca	PERSON
fuelectenerg-900	930	4	a. bachtold	PERSON
fuelectenerg-900	930	5	8	CARDINAL
fuelectenerg-900	931	1	3735–3738, 2008	DATE
fuelectenerg-900	932	1	100	CARDINAL
fuelectenerg-900	932	2	a. huttel	PERSON
fuelectenerg-900	932	3	g. steele	PERSON
fuelectenerg-900	932	4	b. witkamp	PERSON
fuelectenerg-900	932	5	m. poot	PERSON
fuelectenerg-900	932	6	l. kouwenhoven	PERSON
fuelectenerg-900	932	7	h. van der zant	PERSON
fuelectenerg-900	932	8	9	CARDINAL
fuelectenerg-900	932	9	2547–2552, 2009	DATE
fuelectenerg-900	933	1	101	CARDINAL
fuelectenerg-900	933	2	benjamin jose aleman	PERSON
fuelectenerg-900	933	3	phd	PERSON
fuelectenerg-900	933	4	university of california, berkeley	ORG
fuelectenerg-900	933	5	2011	DATE
fuelectenerg-900	934	1	102	CARDINAL
fuelectenerg-900	934	2	a. k. geim	PERSON
fuelectenerg-900	934	3	k. s. novoselov	PERSON
fuelectenerg-900	934	4	nat	PERSON
fuelectenerg-900	936	1	6	CARDINAL
fuelectenerg-900	937	1	183–191, 2007	DATE
fuelectenerg-900	938	1	103	CARDINAL
fuelectenerg-900	938	2	j. s. bunch	PERSON
fuelectenerg-900	938	3	a. m. van der zande	PERSON
fuelectenerg-900	938	4	s. s. verbridge	PERSON
fuelectenerg-900	938	5	i. w. frank	PERSON
fuelectenerg-900	938	6	d. m. tanenbaum	PERSON
fuelectenerg-900	938	7	j. m. parpia	PERSON
fuelectenerg-900	938	8	h. g. craighead	PERSON
fuelectenerg-900	938	9	p. l. mceuen	PERSON
fuelectenerg-900	938	10	315	CARDINAL
fuelectenerg-900	939	1	490-493	CARDINAL
fuelectenerg-900	940	1	104	CARDINAL
fuelectenerg-900	940	2	d. garcia-sanchez	PERSON
fuelectenerg-900	940	3	a. m. van der zande	PERSON
fuelectenerg-900	940	4	a. san paulo	PERSON
fuelectenerg-900	940	5	b. lassagne	PERSON
fuelectenerg-900	940	6	p. l. mceuen a. bachtold	PERSON
fuelectenerg-900	940	7	8	CARDINAL
fuelectenerg-900	941	1	1399-1403	DATE
fuelectenerg-900	942	1	105	CARDINAL
fuelectenerg-900	942	2	c. y. chen	PERSON
fuelectenerg-900	942	3	s. rosenblatt	PERSON
fuelectenerg-900	942	4	k. i. bolotin	PERSON
fuelectenerg-900	942	5	w. kalb	PERSON
fuelectenerg-900	942	6	p. kim	PERSON
fuelectenerg-900	942	7	i. kymissis	PERSON
fuelectenerg-900	942	8	h. l. stormer	PERSON
fuelectenerg-900	942	9	t. f. heinz	PERSON
fuelectenerg-900	942	10	j. hone	PERSON
fuelectenerg-900	942	11	nat	DATE
fuelectenerg-900	942	12	nanotech	ORG
fuelectenerg-900	943	1	4	CARDINAL
fuelectenerg-900	944	1	2009	DATE
fuelectenerg-900	945	1	106	CARDINAL
fuelectenerg-900	945	2	r. a. barton	PERSON
fuelectenerg-900	945	3	b. ilic	PERSON
fuelectenerg-900	945	4	a. m. van der zande	PERSON
fuelectenerg-900	945	5	w. s. whitney	PERSON
fuelectenerg-900	945	6	p. l. mceuen	PERSON
fuelectenerg-900	945	7	j. m. parpia	PERSON
fuelectenerg-900	945	8	h. g. craighead	PERSON
fuelectenerg-900	945	9	11	CARDINAL
fuelectenerg-900	946	1	1232–1236, 2011	DATE
fuelectenerg-900	947	1	107	CARDINAL
fuelectenerg-900	947	2	y. s. greenberg	PERSON
fuelectenerg-900	947	3	y. a. pashkin	PERSON
fuelectenerg-900	947	4	e. il'ichev	PERSON
fuelectenerg-900	948	1	55	DATE
fuelectenerg-900	949	1	382	CARDINAL
fuelectenerg-900	949	2	2012	DATE
fuelectenerg-900	950	1	108	CARDINAL
fuelectenerg-900	950	2	z. djurić	PERSON
fuelectenerg-900	950	3	microelectron	ORG
fuelectenerg-900	951	1	reliab	PERSON
fuelectenerg-900	953	1	40	DATE
fuelectenerg-900	954	1	919-932	QUANTITY
fuelectenerg-900	954	2	2000	DATE
fuelectenerg-900	955	1	109	CARDINAL
fuelectenerg-900	955	2	f. l.	PERSON
fuelectenerg-900	955	3	j. r. vig	PERSON
fuelectenerg-900	958	1	freq.control	PERSON
fuelectenerg-900	958	2	42	DATE
fuelectenerg-900	959	1	576-589	CARDINAL
fuelectenerg-900	960	1	110	CARDINAL
fuelectenerg-900	960	2	j. r. vig	PERSON
fuelectenerg-900	960	3	y. kim	PERSON
fuelectenerg-900	964	1	46	DATE
fuelectenerg-900	965	1	1558-1565	CARDINAL
fuelectenerg-900	965	2	1999	DATE
fuelectenerg-900	966	1	111	CARDINAL
fuelectenerg-900	966	2	a. n. cleland	PERSON
fuelectenerg-900	966	3	m. l. roukes	PERSON
fuelectenerg-900	966	4	j. appl	PERSON
fuelectenerg-900	967	1	lett.	PERSON
fuelectenerg-900	968	1	92	CARDINAL
fuelectenerg-900	969	1	2758-2769	CARDINAL
fuelectenerg-900	969	2	2002	DATE
fuelectenerg-900	970	1	381	CARDINAL
fuelectenerg-900	970	2	112	CARDINAL
fuelectenerg-900	970	3	z. djurić	PERSON
fuelectenerg-900	970	4	1st	ORDINAL
fuelectenerg-900	970	5	iwon 2005	GPE
fuelectenerg-900	970	6	belgrade	GPE
fuelectenerg-900	970	7	serbia	GPE
fuelectenerg-900	970	8	montenegro	GPE
fuelectenerg-900	970	9	2005	DATE
fuelectenerg-900	971	1	33	CARDINAL
fuelectenerg-900	972	1	113	CARDINAL
fuelectenerg-900	972	2	z. djurić	PERSON
fuelectenerg-900	972	3	xliv	ORG
fuelectenerg-900	972	4	serbia	GPE
fuelectenerg-900	972	5	2000	DATE
fuelectenerg-900	973	1	9-16	CARDINAL
fuelectenerg-900	974	1	114	CARDINAL
fuelectenerg-900	974	2	k. yong	PERSON
fuelectenerg-900	974	3	j. r. vig	PERSON
fuelectenerg-900	977	1	36	DATE
fuelectenerg-900	978	1	452	CARDINAL
fuelectenerg-900	979	1	115	CARDINAL
fuelectenerg-900	979	2	z. djurić	PERSON
fuelectenerg-900	979	3	o. jakšić	ORG
fuelectenerg-900	979	4	d. randjelović	PERSON
fuelectenerg-900	980	1	96	DATE
fuelectenerg-900	981	1	244-251	CARDINAL
fuelectenerg-900	981	2	2002	DATE
fuelectenerg-900	982	1	116	CARDINAL
fuelectenerg-900	982	2	z. djurić	PERSON
fuelectenerg-900	982	3	i. jokić	PERSON
fuelectenerg-900	982	4	m. frantlović	PERSON
fuelectenerg-900	982	5	o. jakšić	ORG
fuelectenerg-900	982	6	two	CARDINAL
fuelectenerg-900	982	7	24th	ORDINAL
fuelectenerg-900	982	8	1	CARDINAL
fuelectenerg-900	982	9	serbia	GPE
fuelectenerg-900	982	10	2004	DATE
fuelectenerg-900	983	1	197-200	CARDINAL
fuelectenerg-900	984	1	117	CARDINAL
fuelectenerg-900	984	2	z. djurić	PERSON
fuelectenerg-900	984	3	i. jokić	PERSON
fuelectenerg-900	984	4	m. frantlović	PERSON
fuelectenerg-900	984	5	o. jakšić	PERSON
fuelectenerg-900	985	1	127	CARDINAL
fuelectenerg-900	986	1	625-631	CARDINAL
fuelectenerg-900	987	1	118	CARDINAL
fuelectenerg-900	987	2	i. jokić	PERSON
fuelectenerg-900	987	3	z. djurić	PERSON
fuelectenerg-900	987	4	m. frantlović	PERSON
fuelectenerg-900	987	5	k. radulović	PERSON
fuelectenerg-900	987	6	z. jokić	PERSON
fuelectenerg-900	988	1	166–167	CARDINAL
fuelectenerg-900	989	1	535–543	CARDINAL
fuelectenerg-900	989	2	2012	DATE
fuelectenerg-900	990	1	119	CARDINAL
fuelectenerg-900	990	2	m. frantlović	PERSON
fuelectenerg-900	990	3	i. jokić	PERSON
fuelectenerg-900	990	4	z. djurić	PERSON
fuelectenerg-900	990	5	k. radulović	PERSON
fuelectenerg-900	990	6	189	CARDINAL
fuelectenerg-900	991	1	71-79	CARDINAL
fuelectenerg-900	991	2	2013	DATE
fuelectenerg-900	992	1	120	CARDINAL
fuelectenerg-900	992	2	z. djurić	PERSON
fuelectenerg-900	992	3	i. jokić	PERSON
fuelectenerg-900	992	4	m. frantlović	PERSON
fuelectenerg-900	992	5	k. radulović	PERSON
fuelectenerg-900	992	6	two	CARDINAL
fuelectenerg-900	993	1	eng	GPE
fuelectenerg-900	993	2	86	DATE
fuelectenerg-900	993	3	1278-1281	CARDINAL
fuelectenerg-900	993	4	2009	DATE
fuelectenerg-900	994	1	121	CARDINAL
fuelectenerg-900	994	2	z. djurić	PERSON
fuelectenerg-900	994	3	i. jokić	PERSON
fuelectenerg-900	994	4	m. djukić	PERSON
fuelectenerg-900	994	5	m. frantlović	PERSON
fuelectenerg-900	995	1	eng	GPE
fuelectenerg-900	996	1	87	DATE
fuelectenerg-900	997	1	1181-1184, 2010	DATE
fuelectenerg-900	998	1	122	CARDINAL
fuelectenerg-900	998	2	i. jokić	PERSON
fuelectenerg-900	998	3	m. frantlović	PERSON
fuelectenerg-900	998	4	z. djurić	PERSON
fuelectenerg-900	998	5	29th	ORDINAL
fuelectenerg-900	998	6	belgrade	GPE
fuelectenerg-900	998	7	serbia	GPE
fuelectenerg-900	998	8	2014	DATE
fuelectenerg-900	999	1	117	CARDINAL
fuelectenerg-900	1000	1	123	CARDINAL
fuelectenerg-900	1000	2	i. jokić	PERSON
fuelectenerg-900	1000	3	m. frantlović	PERSON
fuelectenerg-900	1000	4	z. djurić	PERSON
fuelectenerg-900	1000	5	m. dukić	PERSON
fuelectenerg-900	1000	6	10th	ORDINAL
fuelectenerg-900	1000	7	serbia	GPE
fuelectenerg-900	1000	8	2011	DATE
fuelectenerg-900	1000	9	114	CARDINAL
fuelectenerg-900	1001	1	124	CARDINAL
fuelectenerg-900	1001	2	van vliet	PERSON
fuelectenerg-900	1001	3	j.r.	GPE
fuelectenerg-900	1001	4	r. e. burgess	PERSON
fuelectenerg-900	1001	5	new york	GPE
fuelectenerg-900	1001	6	london	GPE
fuelectenerg-900	1001	7	1965	DATE
fuelectenerg-900	1002	1	267-354	CARDINAL
fuelectenerg-900	1003	1	125	CARDINAL
fuelectenerg-900	1003	2	s. yousefi	PERSON
fuelectenerg-900	1003	3	t. eriksson	ORG
fuelectenerg-900	1003	4	d. kuylenstierna	PERSON
fuelectenerg-900	1003	5	new orleans	GPE
fuelectenerg-900	1003	6	2010	DATE
fuelectenerg-900	1004	1	126	CARDINAL
fuelectenerg-900	1004	2	g. v. klimovitch	PERSON
fuelectenerg-900	1004	3	2000	DATE
fuelectenerg-900	1004	4	1	CARDINAL
fuelectenerg-900	1004	5	geneva	GPE
fuelectenerg-900	1004	6	2000	DATE
fuelectenerg-900	1005	1	127	CARDINAL
fuelectenerg-900	1005	2	m. j. buckingham	PERSON
fuelectenerg-900	1005	3	ellis horwood ltd.	ORG
fuelectenerg-900	1005	4	1983	DATE