id	sid	eid	entity	type
fuelectenerg-966	1	1	29	CARDINAL
fuelectenerg-966	2	1	613 620	CARDINAL
fuelectenerg-966	2	2	10.2298	CARDINAL
fuelectenerg-966	2	3	vladimir vasilievich belyakov	PERSON
fuelectenerg-966	2	4	maksim aleksandrovich matusko	PERSON
fuelectenerg-966	2	5	anatoly vladimirovich golovin	PERSON
fuelectenerg-966	2	6	evgeniy anatolovich gromov microelectronic department	ORG
fuelectenerg-966	2	7	national research nuclear university	ORG
fuelectenerg-966	2	8	moscow	GPE
fuelectenerg-966	2	9	moscow	GPE
fuelectenerg-966	2	10	russian	NORP
fuelectenerg-966	7	1	1	CARDINAL
fuelectenerg-966	7	2	1-5	CARDINAL
fuelectenerg-966	8	1	1	CARDINAL
fuelectenerg-966	14	1	6	CARDINAL
fuelectenerg-966	15	1	march 29, 2015	DATE
fuelectenerg-966	15	2	26	CARDINAL
fuelectenerg-966	15	3	2016	DATE
fuelectenerg-966	15	4	matusko microelectronic department	ORG
fuelectenerg-966	15	5	national research nuclear university	ORG
fuelectenerg-966	15	6	moscow	GPE
fuelectenerg-966	15	7	moscow	GPE
fuelectenerg-966	15	8	russian	NORP
fuelectenerg-966	16	1	614	CARDINAL
fuelectenerg-966	16	2	v. belyakov	PERSON
fuelectenerg-966	16	3	m. a. matusko	PERSON
fuelectenerg-966	16	4	a. v. golovin	PERSON
fuelectenerg-966	16	5	e. a. gromov ionization	PERSON
fuelectenerg-966	19	1	fig	ORG
fuelectenerg-966	20	1	1	CARDINAL
fuelectenerg-966	30	1	615 2	CARDINAL
fuelectenerg-966	31	1	1 mm	QUANTITY
fuelectenerg-966	33	1	2	CARDINAL
fuelectenerg-966	35	1	fig	ORG
fuelectenerg-966	36	1	2	CARDINAL
fuelectenerg-966	46	1	one	CARDINAL
fuelectenerg-966	46	2	2	CARDINAL
fuelectenerg-966	47	1	3	CARDINAL
fuelectenerg-966	48	1	fig	ORG
fuelectenerg-966	49	1	3	CARDINAL
fuelectenerg-966	49	2	two	CARDINAL
fuelectenerg-966	50	1	616	CARDINAL
fuelectenerg-966	51	1	v. belyakov	PERSON
fuelectenerg-966	51	2	m. a. matusko	PERSON
fuelectenerg-966	51	3	a. v. golovin	PERSON
fuelectenerg-966	51	4	e. a. gromov	PERSON
fuelectenerg-966	51	5	3	CARDINAL
fuelectenerg-966	57	1	two	CARDINAL
fuelectenerg-966	58	1	zero	CARDINAL
fuelectenerg-966	63	1	first	ORDINAL
fuelectenerg-966	66	1	3	CARDINAL
fuelectenerg-966	67	1	second	ORDINAL
fuelectenerg-966	68	1	4	CARDINAL
fuelectenerg-966	69	1	4a	CARDINAL
fuelectenerg-966	71	1	4b	CARDINAL
fuelectenerg-966	73	1	one	CARDINAL
fuelectenerg-966	74	1	617	CARDINAL
fuelectenerg-966	75	1	4	CARDINAL
fuelectenerg-966	75	2	one	CARDINAL
fuelectenerg-966	76	1	4	CARDINAL
fuelectenerg-966	76	2	two	CARDINAL
fuelectenerg-966	76	3	1	CARDINAL
fuelectenerg-966	76	4	1	CARDINAL
fuelectenerg-966	76	5	2	CARDINAL
fuelectenerg-966	79	1	first	ORDINAL
fuelectenerg-966	83	1	first	ORDINAL
fuelectenerg-966	83	2	uc1	NORP
fuelectenerg-966	83	3	ub	ORG
fuelectenerg-966	83	4	one	CARDINAL
fuelectenerg-966	83	5	seven	CARDINAL
fuelectenerg-966	83	6	5	CARDINAL
fuelectenerg-966	83	7	1	CARDINAL
fuelectenerg-966	84	1	2	CARDINAL
fuelectenerg-966	84	2	two	CARDINAL
fuelectenerg-966	85	1	first	ORDINAL
fuelectenerg-966	86	1	second	ORDINAL
fuelectenerg-966	88	1	3	CARDINAL
fuelectenerg-966	88	2	first	ORDINAL
fuelectenerg-966	88	3	ub	ORG
fuelectenerg-966	89	1	zero	CARDINAL
fuelectenerg-966	89	2	618	CARDINAL
fuelectenerg-966	89	3	v. belyakov	PERSON
fuelectenerg-966	89	4	m. a. matusko	PERSON
fuelectenerg-966	89	5	a. v. golovin	PERSON
fuelectenerg-966	89	6	e. a. gromov	PERSON
fuelectenerg-966	93	1	4	CARDINAL
fuelectenerg-966	94	1	5	CARDINAL
fuelectenerg-966	96	1	second	ORDINAL
fuelectenerg-966	98	1	6	CARDINAL
fuelectenerg-966	99	1	1	CARDINAL
fuelectenerg-966	100	1	7	CARDINAL
fuelectenerg-966	103	1	fig	ORG
fuelectenerg-966	104	1	5	CARDINAL
fuelectenerg-966	105	1	5	CARDINAL
fuelectenerg-966	105	2	6a	CARDINAL
fuelectenerg-966	105	3	6b	CARDINAL
fuelectenerg-966	106	1	about 400	CARDINAL
fuelectenerg-966	106	2	nc	GPE
fuelectenerg-966	107	1	two	CARDINAL
fuelectenerg-966	107	2	more than 3%	PERCENT
fuelectenerg-966	107	3	6a	CARDINAL
fuelectenerg-966	107	4	up to 31%	PERCENT
fuelectenerg-966	107	5	6b	CARDINAL
fuelectenerg-966	108	1	619	CARDINAL
fuelectenerg-966	109	1	6	CARDINAL
fuelectenerg-966	112	1	3	CARDINAL
fuelectenerg-966	114	1	620	CARDINAL
fuelectenerg-966	114	2	v. belyakov	PERSON
fuelectenerg-966	114	3	m. a. matusko	PERSON
fuelectenerg-966	114	4	a. v. golovin	PERSON
fuelectenerg-966	114	5	e. a. gromov	PERSON
fuelectenerg-966	114	6	1	CARDINAL
fuelectenerg-966	114	7	j. e. allen	PERSON
fuelectenerg-966	114	8	i. kisin	PERSON
fuelectenerg-966	114	9	1991	DATE
fuelectenerg-966	115	1	2	CARDINAL
fuelectenerg-966	116	1	6407382	DATE
fuelectenerg-966	117	1	3	CARDINAL
fuelectenerg-966	117	2	w. carr	PERSON
fuelectenerg-966	117	3	new york	GPE
fuelectenerg-966	117	4	1984	DATE
fuelectenerg-966	118	1	4	CARDINAL
fuelectenerg-966	118	2	g. a. eiceman	PERSON
fuelectenerg-966	118	3	z. karpas	PERSON
fuelectenerg-966	118	4	crc press	ORG
fuelectenerg-966	118	5	boca raton	GPE
fuelectenerg-966	118	6	1993	DATE
fuelectenerg-966	119	1	5	CARDINAL
fuelectenerg-966	119	2	m. tabrizchi	PERSON
fuelectenerg-966	119	3	a. abedi	PERSON
fuelectenerg-966	119	4	218	CARDINAL
fuelectenerg-966	120	1	75-85	CARDINAL
fuelectenerg-966	121	1	6	CARDINAL
fuelectenerg-966	121	2	v. s. pershenkov	PERSON
fuelectenerg-966	121	3	a. d. tremasov	PERSON
fuelectenerg-966	121	4	v. belyakov	PERSON
fuelectenerg-966	121	5	a. u. razvalyaev	PERSON
fuelectenerg-966	121	6	s. mochkin	PERSON
fuelectenerg-966	121	7	46	DATE
fuelectenerg-966	121	8	2-4	DATE
fuelectenerg-966	122	1	641-644	CARDINAL
fuelectenerg-966	122	2	february 2006	DATE