id	sid	eid	entity	type
fuelectenerg-971	1	1	29	CARDINAL
fuelectenerg-971	2	1	621 629	CARDINAL
fuelectenerg-971	2	2	10.2298	CARDINAL
fuelectenerg-971	2	3	vladimir vasilevich shurenkov	PERSON
fuelectenerg-971	2	4	sergeevich pershenkov microelectronic department	ORG
fuelectenerg-971	2	5	national research nuclear university	ORG
fuelectenerg-971	2	6	moscow	GPE
fuelectenerg-971	2	7	moscow	GPE
fuelectenerg-971	2	8	russian	NORP
fuelectenerg-971	3	1	recent years	DATE
fuelectenerg-971	3	2	highpower microwave	ORG
fuelectenerg-971	5	1	1	CARDINAL
fuelectenerg-971	5	2	recent years	DATE
fuelectenerg-971	13	1	1	CARDINAL
fuelectenerg-971	14	1	section 1	LAW
fuelectenerg-971	15	1	section 2	LAW
fuelectenerg-971	16	1	section 3	LAW
fuelectenerg-971	17	1	section 4	DATE
fuelectenerg-971	18	1	march 31, 2015	DATE
fuelectenerg-971	18	2	january 29	DATE
fuelectenerg-971	18	3	2016	DATE
fuelectenerg-971	18	4	vladimir vasilevich shurenkov	PERSON
fuelectenerg-971	18	5	national research nuclear university	ORG
fuelectenerg-971	18	6	moscow	GPE
fuelectenerg-971	18	7	moscow	GPE
fuelectenerg-971	18	8	115409	DATE
fuelectenerg-971	18	9	russian	NORP
fuelectenerg-971	19	1	622	CARDINAL
fuelectenerg-971	19	2	v. s. pershenkov fig	PERSON
fuelectenerg-971	20	1	1	CARDINAL
fuelectenerg-971	21	1	2	CARDINAL
fuelectenerg-971	21	2	emp	ORG
fuelectenerg-971	21	3	200	CARDINAL
fuelectenerg-971	22	1	1	CARDINAL
fuelectenerg-971	22	2	4	CARDINAL
fuelectenerg-971	22	3	5	CARDINAL
fuelectenerg-971	22	4	8	CARDINAL
fuelectenerg-971	24	1	emi	ORG
fuelectenerg-971	25	1	emi	ORG
fuelectenerg-971	25	2	4	CARDINAL
fuelectenerg-971	34	1	one	CARDINAL
fuelectenerg-971	34	2	emi	ORG
fuelectenerg-971	36	1	emp	ORG
fuelectenerg-971	36	2	zero	CARDINAL
fuelectenerg-971	38	1	emp	ORG
fuelectenerg-971	39	1	1	CARDINAL
fuelectenerg-971	39	2	4	CARDINAL
fuelectenerg-971	42	1	several hundreds	CARDINAL
fuelectenerg-971	44	1	623 3	DATE
fuelectenerg-971	46	1	1	CARDINAL
fuelectenerg-971	46	2	3	CARDINAL
fuelectenerg-971	50	1	two	CARDINAL
fuelectenerg-971	50	2	fdc	ORG
fuelectenerg-971	50	3	fdc	PERSON
fuelectenerg-971	51	1	6	CARDINAL
fuelectenerg-971	52	1	3	CARDINAL
fuelectenerg-971	55	1	3	CARDINAL
fuelectenerg-971	56	1	624	CARDINAL
fuelectenerg-971	56	2	v. s. pershenkov	PERSON
fuelectenerg-971	56	3	1	CARDINAL
fuelectenerg-971	56	4	8	CARDINAL
fuelectenerg-971	57	1	4	CARDINAL
fuelectenerg-971	59	1	fig	ORG
fuelectenerg-971	60	1	4	CARDINAL
fuelectenerg-971	61	1	bdc	ORG
fuelectenerg-971	64	1	1	CARDINAL
fuelectenerg-971	65	1	1	CARDINAL
fuelectenerg-971	65	2	15v-65v	CARDINAL
fuelectenerg-971	65	3	7v	CARDINAL
fuelectenerg-971	65	4	7v-15v	CARDINAL
fuelectenerg-971	65	5	3.3	CARDINAL
fuelectenerg-971	65	6	5	CARDINAL
fuelectenerg-971	65	7	3.3v-5v	CARDINAL
fuelectenerg-971	65	8	625	CARDINAL
fuelectenerg-971	84	1	tem	ORG
fuelectenerg-971	85	1	tem	ORG
fuelectenerg-971	86	1	tem	ORG
fuelectenerg-971	87	1	4	CARDINAL
fuelectenerg-971	87	2	four	CARDINAL
fuelectenerg-971	87	3	1,5,8,9	CARDINAL
fuelectenerg-971	88	1	four	CARDINAL
fuelectenerg-971	89	1	4.1	CARDINAL
fuelectenerg-971	90	1	two	CARDINAL
fuelectenerg-971	90	2	626	CARDINAL
fuelectenerg-971	90	3	v. shurenkov	PERSON
fuelectenerg-971	91	1	v. s. pershenkov a.	PERSON
fuelectenerg-971	91	2	one	CARDINAL
fuelectenerg-971	96	1	4.2	CARDINAL
fuelectenerg-971	97	1	hfsource	ORG
fuelectenerg-971	98	1	two	CARDINAL
fuelectenerg-971	98	2	a. latch-	PERSON
fuelectenerg-971	103	1	between 600	CARDINAL
fuelectenerg-971	103	2	800 degrees kelvin	QUANTITY
fuelectenerg-971	104	1	5	CARDINAL
fuelectenerg-971	104	2	four	CARDINAL
fuelectenerg-971	105	1	5.1	CARDINAL
fuelectenerg-971	107	1	5	CARDINAL
fuelectenerg-971	108	1	5	CARDINAL
fuelectenerg-971	110	1	2	CARDINAL
fuelectenerg-971	111	1	627	CARDINAL
fuelectenerg-971	112	1	5	CARDINAL
fuelectenerg-971	113	1	5.2	CARDINAL
fuelectenerg-971	115	1	two	CARDINAL
fuelectenerg-971	115	2	two	CARDINAL
fuelectenerg-971	115	3	6	CARDINAL
fuelectenerg-971	117	1	7	CARDINAL
fuelectenerg-971	119	1	6	CARDINAL
fuelectenerg-971	120	1	about 1	CARDINAL
fuelectenerg-971	120	2	1	CARDINAL
fuelectenerg-971	122	1	5.3	CARDINAL
fuelectenerg-971	126	1	pnp	ORG
fuelectenerg-971	128	1	4	CARDINAL
fuelectenerg-971	128	2	6	CARDINAL
fuelectenerg-971	129	1	628	CARDINAL
fuelectenerg-971	129	2	v. s. pershenkov fig	PERSON
fuelectenerg-971	130	1	7	CARDINAL
fuelectenerg-971	131	1	cmos gate	LOC
fuelectenerg-971	132	1	one	CARDINAL
fuelectenerg-971	135	1	pnp	ORG
fuelectenerg-971	135	2	pnp	ORG
fuelectenerg-971	137	1	5.4	CARDINAL
fuelectenerg-971	138	1	emi	ORG
fuelectenerg-971	138	2	6,11	CARDINAL
fuelectenerg-971	140	1	10	CARDINAL
fuelectenerg-971	142	1	fig	ORG
fuelectenerg-971	143	1	8	CARDINAL
fuelectenerg-971	145	1	629 6	CARDINAL
fuelectenerg-971	145	2	emi	ORG
fuelectenerg-971	146	1	emp	ORG
fuelectenerg-971	150	1	1	CARDINAL
fuelectenerg-971	150	2	c. kopp	PERSON
fuelectenerg-971	150	3	r. pose	PERSON
fuelectenerg-971	150	4	monash university	ORG
fuelectenerg-971	150	5	clayton	GPE
fuelectenerg-971	150	6	victoria	GPE
fuelectenerg-971	150	7	australia	GPE
fuelectenerg-971	151	1	2	CARDINAL
fuelectenerg-971	151	2	v. lakshminarayanan	PERSON
fuelectenerg-971	151	3	emc	ORG
fuelectenerg-971	151	4	r.f.	GPE
fuelectenerg-971	151	5	sep 1999	DATE
fuelectenerg-971	151	6	22	CARDINAL
fuelectenerg-971	151	7	9	DATE
fuelectenerg-971	152	1	3	CARDINAL
fuelectenerg-971	152	2	pdf	ORG
fuelectenerg-971	153	1	4	CARDINAL
fuelectenerg-971	153	2	university of maryland	ORG
fuelectenerg-971	153	3	redstone arsenal	GPE
fuelectenerg-971	153	4	alabama	GPE
fuelectenerg-971	153	5	august 8-12, 2005	DATE
fuelectenerg-971	154	1	5	CARDINAL
fuelectenerg-971	154	2	s. m. hwang	PERSON
fuelectenerg-971	154	3	j. i. hong	PERSON
fuelectenerg-971	154	4	c. s. huh	PERSON
fuelectenerg-971	154	5	81	DATE
fuelectenerg-971	155	1	61-72, 2008	DATE
fuelectenerg-971	156	1	6	CARDINAL
fuelectenerg-971	156	2	shurenkov	PERSON
fuelectenerg-971	156	3	1016	CARDINAL
fuelectenerg-971	156	4	521-525	CARDINAL
fuelectenerg-971	156	5	2014	DATE
fuelectenerg-971	157	1	7	CARDINAL
fuelectenerg-971	157	2	j. hong	PERSON
fuelectenerg-971	157	3	s.-m	GPE
fuelectenerg-971	158	1	hwang	PERSON
fuelectenerg-971	158	2	k.-y	GPE
fuelectenerg-971	159	1	kim	PERSON
fuelectenerg-971	162	1	5	CARDINAL
fuelectenerg-971	162	2	8, 2009	DATE
fuelectenerg-971	163	1	8	CARDINAL
fuelectenerg-971	163	2	x. fei	PERSON
fuelectenerg-971	163	3	l. chenglong	PERSON
fuelectenerg-971	163	4	130-134	CARDINAL
fuelectenerg-971	164	1	1383-1386	CARDINAL
fuelectenerg-971	164	2	2012	DATE
fuelectenerg-971	165	1	9	CARDINAL
fuelectenerg-971	165	2	m. rohe	PERSON
fuelectenerg-971	165	3	s. korte	PERSON
fuelectenerg-971	165	4	m. koch	PERSON
fuelectenerg-971	166	1	2008	DATE
fuelectenerg-971	167	1	10	CARDINAL
fuelectenerg-971	167	2	a. aladdin	PERSON
fuelectenerg-971	167	3	m. kadi	PERSON
fuelectenerg-971	167	4	k. daoud	PERSON
fuelectenerg-971	167	5	h. m. p. eudeline	PERSON
fuelectenerg-971	167	6	1	CARDINAL
fuelectenerg-971	167	7	6	CARDINAL
fuelectenerg-971	168	1	475-482	CARDINAL
fuelectenerg-971	168	2	2009	DATE
fuelectenerg-971	169	1	11	CARDINAL
fuelectenerg-971	169	2	v.v. shurenkov	PERSON
fuelectenerg-971	169	3	vhf	ORG
fuelectenerg-971	169	4	n4	GPE
fuelectenerg-971	170	1	16-19, 2001	CARDINAL