id	sid	tid	token	lemma	pos
fuelectenerg-1260	1	1	mems	mems	PROPN
fuelectenerg-1260	1	2	design	design	NOUN
fuelectenerg-1260	1	3	simplification	simplification	NOUN
fuelectenerg-1260	1	4	with	with	ADP
fuelectenerg-1260	1	5	virtual	virtual	ADJ
fuelectenerg-1260	1	6	prototyping	prototyping	NOUN
fuelectenerg-1260	1	7	facta	facta	PROPN
fuelectenerg-1260	1	8	universitatis	universitatis	PROPN
fuelectenerg-1260	1	9	series	series	NOUN
fuelectenerg-1260	1	10	:	:	PUNCT
fuelectenerg-1260	1	11	electronics	electronic	NOUN
fuelectenerg-1260	1	12	and	and	CCONJ
fuelectenerg-1260	1	13	energetics	energetics	NOUN
fuelectenerg-1260	1	14	vol	vol	NOUN
fuelectenerg-1260	1	15	.	.	PROPN
fuelectenerg-1260	1	16	29	29	NUM
fuelectenerg-1260	1	17	,	,	PUNCT
fuelectenerg-1260	1	18	no	no	DET
fuelectenerg-1260	1	19	1	1	NUM
fuelectenerg-1260	1	20	,	,	PUNCT
fuelectenerg-1260	1	21	march	march	PROPN
fuelectenerg-1260	1	22	2016	2016	NUM
fuelectenerg-1260	1	23	,	,	PUNCT
fuelectenerg-1260	1	24	pp	pp	ADV
fuelectenerg-1260	1	25	.	.	PUNCT
fuelectenerg-1260	2	1	11	11	NUM
fuelectenerg-1260	2	2	34	34	NUM
fuelectenerg-1260	2	3	doi	doi	NOUN
fuelectenerg-1260	2	4	:	:	PUNCT
fuelectenerg-1260	2	5	10.2298	10.2298	NUM
fuelectenerg-1260	2	6	/	/	SYM
fuelectenerg-1260	2	7	fuee1601011s	fuee1601011s	ADJ
fuelectenerg-1260	2	8	mems	mem	NOUN
fuelectenerg-1260	2	9	design	design	NOUN
fuelectenerg-1260	2	10	simplification	simplification	NOUN
fuelectenerg-1260	2	11	with	with	ADP
fuelectenerg-1260	2	12	virtual	virtual	ADJ
fuelectenerg-1260	2	13	prototyping	prototyping	NOUN
fuelectenerg-1260	2	14	renate	renate	PROPN
fuelectenerg-1260	2	15	sitte	sitte	PROPN
fuelectenerg-1260	2	16	griffith	griffith	PROPN
fuelectenerg-1260	2	17	university	university	PROPN
fuelectenerg-1260	2	18	,	,	PUNCT
fuelectenerg-1260	2	19	griffith	griffith	PROPN
fuelectenerg-1260	2	20	sciences	sciences	PROPN
fuelectenerg-1260	2	21	–	–	PUNCT
fuelectenerg-1260	2	22	ict	ict	NOUN
fuelectenerg-1260	2	23	,	,	PUNCT
fuelectenerg-1260	2	24	gold	gold	NOUN
fuelectenerg-1260	2	25	coast	coast	NOUN
fuelectenerg-1260	2	26	,	,	PUNCT
fuelectenerg-1260	2	27	australia	australia	PROPN
fuelectenerg-1260	2	28	abstract	abstract	NOUN
fuelectenerg-1260	2	29	.	.	PUNCT
fuelectenerg-1260	3	1	mems	mem	NOUN
fuelectenerg-1260	3	2	design	design	NOUN
fuelectenerg-1260	3	3	requires	require	VERB
fuelectenerg-1260	3	4	a	a	DET
fuelectenerg-1260	3	5	good	good	ADJ
fuelectenerg-1260	3	6	understanding	understanding	NOUN
fuelectenerg-1260	3	7	of	of	ADP
fuelectenerg-1260	3	8	interactions	interaction	NOUN
fuelectenerg-1260	3	9	in	in	ADP
fuelectenerg-1260	3	10	complex	complex	ADJ
fuelectenerg-1260	3	11	processes	process	NOUN
fuelectenerg-1260	3	12	and	and	CCONJ
fuelectenerg-1260	3	13	highly	highly	ADV
fuelectenerg-1260	3	14	specialized	specialized	ADJ
fuelectenerg-1260	3	15	interdisciplinary	interdisciplinary	ADJ
fuelectenerg-1260	3	16	skills	skill	NOUN
fuelectenerg-1260	3	17	.	.	PUNCT
fuelectenerg-1260	4	1	traditional	traditional	ADJ
fuelectenerg-1260	4	2	prototyping	prototyping	NOUN
fuelectenerg-1260	4	3	is	be	AUX
fuelectenerg-1260	4	4	not	not	PART
fuelectenerg-1260	4	5	easy	easy	ADJ
fuelectenerg-1260	4	6	or	or	CCONJ
fuelectenerg-1260	4	7	cheap	cheap	ADJ
fuelectenerg-1260	4	8	due	due	ADJ
fuelectenerg-1260	4	9	to	to	ADP
fuelectenerg-1260	4	10	typically	typically	ADV
fuelectenerg-1260	4	11	needing	need	VERB
fuelectenerg-1260	4	12	very	very	ADV
fuelectenerg-1260	4	13	expensive	expensive	ADJ
fuelectenerg-1260	4	14	manufacturing	manufacturing	NOUN
fuelectenerg-1260	4	15	facilities	facility	NOUN
fuelectenerg-1260	4	16	for	for	ADP
fuelectenerg-1260	4	17	its	its	PRON
fuelectenerg-1260	4	18	implementation	implementation	NOUN
fuelectenerg-1260	4	19	.	.	PUNCT
fuelectenerg-1260	5	1	progress	progress	NOUN
fuelectenerg-1260	5	2	towards	towards	ADP
fuelectenerg-1260	5	3	faster	fast	ADJ
fuelectenerg-1260	5	4	,	,	PUNCT
fuelectenerg-1260	5	5	cheaper	cheap	ADJ
fuelectenerg-1260	5	6	prototyping	prototyping	NOUN
fuelectenerg-1260	5	7	has	have	AUX
fuelectenerg-1260	5	8	been	be	AUX
fuelectenerg-1260	5	9	achieved	achieve	VERB
fuelectenerg-1260	5	10	but	but	CCONJ
fuelectenerg-1260	5	11	,	,	PUNCT
fuelectenerg-1260	5	12	it	it	PRON
fuelectenerg-1260	5	13	can	can	AUX
fuelectenerg-1260	5	14	not	not	PART
fuelectenerg-1260	5	15	be	be	AUX
fuelectenerg-1260	5	16	applied	apply	VERB
fuelectenerg-1260	5	17	to	to	ADP
fuelectenerg-1260	5	18	mems	mem	NOUN
fuelectenerg-1260	5	19	fabrication	fabrication	NOUN
fuelectenerg-1260	5	20	in	in	ADP
fuelectenerg-1260	5	21	general	general	NOUN
fuelectenerg-1260	5	22	.	.	PUNCT
fuelectenerg-1260	6	1	this	this	DET
fuelectenerg-1260	6	2	paper	paper	NOUN
fuelectenerg-1260	6	3	analyzes	analyze	VERB
fuelectenerg-1260	6	4	the	the	DET
fuelectenerg-1260	6	5	benefits	benefit	NOUN
fuelectenerg-1260	6	6	of	of	ADP
fuelectenerg-1260	6	7	virtual	virtual	ADJ
fuelectenerg-1260	6	8	prototyping	prototyping	NOUN
fuelectenerg-1260	6	9	for	for	ADP
fuelectenerg-1260	6	10	a	a	DET
fuelectenerg-1260	6	11	simplification	simplification	NOUN
fuelectenerg-1260	6	12	and	and	CCONJ
fuelectenerg-1260	6	13	aid	aid	NOUN
fuelectenerg-1260	6	14	in	in	ADP
fuelectenerg-1260	6	15	mems	mem	NOUN
fuelectenerg-1260	6	16	design	design	NOUN
fuelectenerg-1260	6	17	and	and	CCONJ
fuelectenerg-1260	6	18	proposes	propose	VERB
fuelectenerg-1260	6	19	the	the	DET
fuelectenerg-1260	6	20	continuation	continuation	NOUN
fuelectenerg-1260	6	21	of	of	ADP
fuelectenerg-1260	6	22	mems	mem	NOUN
fuelectenerg-1260	6	23	animated	animate	VERB
fuelectenerg-1260	6	24	graphic	graphic	ADJ
fuelectenerg-1260	6	25	design	design	NOUN
fuelectenerg-1260	6	26	aid	aid	NOUN
fuelectenerg-1260	6	27	(	(	PUNCT
fuelectenerg-1260	6	28	magda	magda	NOUN
fuelectenerg-1260	6	29	)	)	PUNCT
fuelectenerg-1260	6	30	project	project	NOUN
fuelectenerg-1260	6	31	.	.	PUNCT
fuelectenerg-1260	7	1	its	its	PRON
fuelectenerg-1260	7	2	purpose	purpose	NOUN
fuelectenerg-1260	7	3	is	be	AUX
fuelectenerg-1260	7	4	to	to	PART
fuelectenerg-1260	7	5	simplify	simplify	VERB
fuelectenerg-1260	7	6	preliminary	preliminary	ADJ
fuelectenerg-1260	7	7	design	design	NOUN
fuelectenerg-1260	7	8	stages	stage	NOUN
fuelectenerg-1260	7	9	and	and	CCONJ
fuelectenerg-1260	7	10	make	make	VERB
fuelectenerg-1260	7	11	mems	mem	NOUN
fuelectenerg-1260	7	12	design	design	VERB
fuelectenerg-1260	7	13	more	more	ADV
fuelectenerg-1260	7	14	accessible	accessible	ADJ
fuelectenerg-1260	7	15	to	to	ADP
fuelectenerg-1260	7	16	a	a	DET
fuelectenerg-1260	7	17	wider	wide	ADJ
fuelectenerg-1260	7	18	audience	audience	NOUN
fuelectenerg-1260	7	19	.	.	PUNCT
fuelectenerg-1260	8	1	key	key	ADJ
fuelectenerg-1260	8	2	words	word	NOUN
fuelectenerg-1260	8	3	:	:	PUNCT
fuelectenerg-1260	8	4	mems	mem	NOUN
fuelectenerg-1260	8	5	,	,	PUNCT
fuelectenerg-1260	8	6	scientific	scientific	ADJ
fuelectenerg-1260	8	7	visualization	visualization	NOUN
fuelectenerg-1260	8	8	,	,	PUNCT
fuelectenerg-1260	8	9	vr	vr	PROPN
fuelectenerg-1260	8	10	-	-	PUNCT
fuelectenerg-1260	8	11	cad	cad	NOUN
fuelectenerg-1260	8	12	tools	tool	NOUN
fuelectenerg-1260	8	13	1	1	NUM
fuelectenerg-1260	8	14	.	.	PUNCT
fuelectenerg-1260	8	15	introduction	introduction	NOUN
fuelectenerg-1260	8	16	and	and	CCONJ
fuelectenerg-1260	8	17	motivation	motivation	NOUN
fuelectenerg-1260	8	18	the	the	DET
fuelectenerg-1260	8	19	purpose	purpose	NOUN
fuelectenerg-1260	8	20	of	of	ADP
fuelectenerg-1260	8	21	this	this	DET
fuelectenerg-1260	8	22	paper	paper	NOUN
fuelectenerg-1260	8	23	is	be	AUX
fuelectenerg-1260	8	24	to	to	PART
fuelectenerg-1260	8	25	motivate	motivate	VERB
fuelectenerg-1260	8	26	making	make	VERB
fuelectenerg-1260	8	27	the	the	DET
fuelectenerg-1260	8	28	design	design	NOUN
fuelectenerg-1260	8	29	of	of	ADP
fuelectenerg-1260	8	30	mems	mem	NOUN
fuelectenerg-1260	8	31	more	more	ADV
fuelectenerg-1260	8	32	broadly	broadly	ADV
fuelectenerg-1260	8	33	accessible	accessible	ADJ
fuelectenerg-1260	8	34	and	and	CCONJ
fuelectenerg-1260	8	35	to	to	PART
fuelectenerg-1260	8	36	give	give	VERB
fuelectenerg-1260	8	37	a	a	DET
fuelectenerg-1260	8	38	glimpse	glimpse	NOUN
fuelectenerg-1260	8	39	and	and	CCONJ
fuelectenerg-1260	8	40	overview	overview	NOUN
fuelectenerg-1260	8	41	on	on	ADP
fuelectenerg-1260	8	42	where	where	SCONJ
fuelectenerg-1260	8	43	to	to	PART
fuelectenerg-1260	8	44	start	start	VERB
fuelectenerg-1260	8	45	for	for	ADP
fuelectenerg-1260	8	46	those	those	PRON
fuelectenerg-1260	8	47	who	who	PRON
fuelectenerg-1260	8	48	wish	wish	VERB
fuelectenerg-1260	8	49	to	to	PART
fuelectenerg-1260	8	50	endeavour	endeavour	VERB
fuelectenerg-1260	8	51	into	into	ADP
fuelectenerg-1260	8	52	this	this	DET
fuelectenerg-1260	8	53	area	area	NOUN
fuelectenerg-1260	8	54	.	.	PUNCT
fuelectenerg-1260	9	1	since	since	SCONJ
fuelectenerg-1260	9	2	its	its	PRON
fuelectenerg-1260	9	3	early	early	ADJ
fuelectenerg-1260	9	4	days	day	NOUN
fuelectenerg-1260	9	5	,	,	PUNCT
fuelectenerg-1260	9	6	the	the	DET
fuelectenerg-1260	9	7	mems	mem	NOUN
fuelectenerg-1260	9	8	industry	industry	NOUN
fuelectenerg-1260	9	9	is	be	AUX
fuelectenerg-1260	9	10	now	now	ADV
fuelectenerg-1260	9	11	established	establish	VERB
fuelectenerg-1260	9	12	and	and	CCONJ
fuelectenerg-1260	9	13	many	many	ADJ
fuelectenerg-1260	9	14	of	of	ADP
fuelectenerg-1260	9	15	the	the	DET
fuelectenerg-1260	9	16	papers	paper	NOUN
fuelectenerg-1260	9	17	presented	present	VERB
fuelectenerg-1260	9	18	here	here	ADV
fuelectenerg-1260	9	19	are	be	AUX
fuelectenerg-1260	9	20	pioneering	pioneer	VERB
fuelectenerg-1260	9	21	work	work	NOUN
fuelectenerg-1260	9	22	that	that	PRON
fuelectenerg-1260	9	23	have	have	AUX
fuelectenerg-1260	9	24	subsequently	subsequently	ADV
fuelectenerg-1260	9	25	been	be	AUX
fuelectenerg-1260	9	26	adopted	adopt	VERB
fuelectenerg-1260	9	27	and	and	CCONJ
fuelectenerg-1260	9	28	laid	lay	VERB
fuelectenerg-1260	9	29	the	the	DET
fuelectenerg-1260	9	30	foundations	foundation	NOUN
fuelectenerg-1260	9	31	of	of	ADP
fuelectenerg-1260	9	32	this	this	DET
fuelectenerg-1260	9	33	industry	industry	NOUN
fuelectenerg-1260	9	34	.	.	PUNCT
fuelectenerg-1260	10	1	nevertheless	nevertheless	ADV
fuelectenerg-1260	10	2	,	,	PUNCT
fuelectenerg-1260	10	3	the	the	DET
fuelectenerg-1260	10	4	production	production	NOUN
fuelectenerg-1260	10	5	technology	technology	NOUN
fuelectenerg-1260	10	6	options	option	NOUN
fuelectenerg-1260	10	7	for	for	ADP
fuelectenerg-1260	10	8	mems	mem	NOUN
fuelectenerg-1260	10	9	remains	remain	VERB
fuelectenerg-1260	10	10	vast	vast	ADJ
fuelectenerg-1260	10	11	;	;	PUNCT
fuelectenerg-1260	10	12	there	there	PRON
fuelectenerg-1260	10	13	is	be	VERB
fuelectenerg-1260	10	14	not	not	PART
fuelectenerg-1260	10	15	a	a	DET
fuelectenerg-1260	10	16	“	"	PUNCT
fuelectenerg-1260	10	17	one	one	NUM
fuelectenerg-1260	10	18	size	size	NOUN
fuelectenerg-1260	10	19	fits	fit	VERB
fuelectenerg-1260	10	20	all	all	PRON
fuelectenerg-1260	10	21	”	"	PUNCT
fuelectenerg-1260	10	22	.	.	PUNCT
fuelectenerg-1260	11	1	manufacturing	manufacturing	NOUN
fuelectenerg-1260	11	2	challenges	challenge	NOUN
fuelectenerg-1260	11	3	are	be	AUX
fuelectenerg-1260	11	4	more	more	ADV
fuelectenerg-1260	11	5	the	the	DET
fuelectenerg-1260	11	6	result	result	NOUN
fuelectenerg-1260	11	7	of	of	ADP
fuelectenerg-1260	11	8	a	a	DET
fuelectenerg-1260	11	9	particular	particular	ADJ
fuelectenerg-1260	11	10	innovation	innovation	NOUN
fuelectenerg-1260	11	11	of	of	ADP
fuelectenerg-1260	11	12	a	a	DET
fuelectenerg-1260	11	13	specific	specific	ADJ
fuelectenerg-1260	11	14	mems	mem	NOUN
fuelectenerg-1260	11	15	than	than	ADP
fuelectenerg-1260	11	16	of	of	ADP
fuelectenerg-1260	11	17	the	the	DET
fuelectenerg-1260	11	18	production	production	NOUN
fuelectenerg-1260	11	19	process	process	NOUN
fuelectenerg-1260	11	20	itself	itself	PRON
fuelectenerg-1260	11	21	.	.	PUNCT
fuelectenerg-1260	12	1	this	this	PRON
fuelectenerg-1260	12	2	is	be	AUX
fuelectenerg-1260	12	3	also	also	ADV
fuelectenerg-1260	12	4	reflected	reflect	VERB
fuelectenerg-1260	12	5	in	in	ADP
fuelectenerg-1260	12	6	the	the	DET
fuelectenerg-1260	12	7	research	research	NOUN
fuelectenerg-1260	12	8	publications	publication	NOUN
fuelectenerg-1260	12	9	.	.	PUNCT
fuelectenerg-1260	13	1	one	one	NUM
fuelectenerg-1260	13	2	of	of	ADP
fuelectenerg-1260	13	3	the	the	DET
fuelectenerg-1260	13	4	difficulties	difficulty	NOUN
fuelectenerg-1260	13	5	in	in	ADP
fuelectenerg-1260	13	6	mems	mem	NOUN
fuelectenerg-1260	13	7	design	design	NOUN
fuelectenerg-1260	13	8	and	and	CCONJ
fuelectenerg-1260	13	9	innovation	innovation	NOUN
fuelectenerg-1260	13	10	is	be	AUX
fuelectenerg-1260	13	11	that	that	SCONJ
fuelectenerg-1260	13	12	it	it	PRON
fuelectenerg-1260	13	13	requires	require	VERB
fuelectenerg-1260	13	14	highly	highly	ADV
fuelectenerg-1260	13	15	specialized	specialized	ADJ
fuelectenerg-1260	13	16	skills	skill	NOUN
fuelectenerg-1260	13	17	and	and	CCONJ
fuelectenerg-1260	13	18	a	a	DET
fuelectenerg-1260	13	19	wide	wide	ADJ
fuelectenerg-1260	13	20	interdisciplinary	interdisciplinary	ADJ
fuelectenerg-1260	13	21	background	background	NOUN
fuelectenerg-1260	13	22	with	with	ADP
fuelectenerg-1260	13	23	experience	experience	NOUN
fuelectenerg-1260	13	24	in	in	ADP
fuelectenerg-1260	13	25	,	,	PUNCT
fuelectenerg-1260	13	26	physics	physics	NOUN
fuelectenerg-1260	13	27	,	,	PUNCT
fuelectenerg-1260	13	28	advanced	advanced	ADJ
fuelectenerg-1260	13	29	mathematical	mathematical	ADJ
fuelectenerg-1260	13	30	modelling	modelling	NOUN
fuelectenerg-1260	13	31	(	(	PUNCT
fuelectenerg-1260	13	32	e.g.	e.g.	ADV
fuelectenerg-1260	13	33	for	for	ADP
fuelectenerg-1260	13	34	microfluidics	microfluidic	NOUN
fuelectenerg-1260	13	35	)	)	PUNCT
fuelectenerg-1260	13	36	,	,	PUNCT
fuelectenerg-1260	13	37	chemistry	chemistry	NOUN
fuelectenerg-1260	13	38	,	,	PUNCT
fuelectenerg-1260	13	39	materials	material	NOUN
fuelectenerg-1260	13	40	engineering	engineering	NOUN
fuelectenerg-1260	13	41	and	and	CCONJ
fuelectenerg-1260	13	42	manufacturing	manufacturing	NOUN
fuelectenerg-1260	13	43	technology	technology	NOUN
fuelectenerg-1260	13	44	to	to	PART
fuelectenerg-1260	13	45	name	name	VERB
fuelectenerg-1260	13	46	a	a	DET
fuelectenerg-1260	13	47	few	few	ADJ
fuelectenerg-1260	13	48	.	.	PUNCT
fuelectenerg-1260	14	1	it	it	PRON
fuelectenerg-1260	14	2	requires	require	VERB
fuelectenerg-1260	14	3	such	such	ADJ
fuelectenerg-1260	14	4	skills	skill	NOUN
fuelectenerg-1260	14	5	for	for	ADP
fuelectenerg-1260	14	6	both	both	PRON
fuelectenerg-1260	14	7	,	,	PUNCT
fuelectenerg-1260	14	8	the	the	DET
fuelectenerg-1260	14	9	technology	technology	NOUN
fuelectenerg-1260	14	10	and	and	CCONJ
fuelectenerg-1260	14	11	design	design	NOUN
fuelectenerg-1260	14	12	of	of	ADP
fuelectenerg-1260	14	13	the	the	DET
fuelectenerg-1260	14	14	mems	mem	NOUN
fuelectenerg-1260	14	15	itself	itself	PRON
fuelectenerg-1260	14	16	,	,	PUNCT
fuelectenerg-1260	14	17	and	and	CCONJ
fuelectenerg-1260	14	18	the	the	DET
fuelectenerg-1260	14	19	science	science	NOUN
fuelectenerg-1260	14	20	and	and	CCONJ
fuelectenerg-1260	14	21	engineering	engineering	NOUN
fuelectenerg-1260	14	22	understanding	understanding	NOUN
fuelectenerg-1260	14	23	at	at	ADP
fuelectenerg-1260	14	24	the	the	DET
fuelectenerg-1260	14	25	mems	mem	NOUN
fuelectenerg-1260	14	26	’	'	PUNCT
fuelectenerg-1260	14	27	application	application	NOUN
fuelectenerg-1260	14	28	niche	niche	NOUN
fuelectenerg-1260	14	29	.	.	PUNCT
fuelectenerg-1260	15	1	these	these	DET
fuelectenerg-1260	15	2	required	require	VERB
fuelectenerg-1260	15	3	specializations	specialization	NOUN
fuelectenerg-1260	15	4	and	and	CCONJ
fuelectenerg-1260	15	5	skills	skill	NOUN
fuelectenerg-1260	15	6	limit	limit	VERB
fuelectenerg-1260	15	7	the	the	DET
fuelectenerg-1260	15	8	potential	potential	NOUN
fuelectenerg-1260	15	9	for	for	ADP
fuelectenerg-1260	15	10	a	a	DET
fuelectenerg-1260	15	11	broader	broad	ADJ
fuelectenerg-1260	15	12	industrial	industrial	ADJ
fuelectenerg-1260	15	13	development	development	NOUN
fuelectenerg-1260	15	14	.	.	PUNCT
fuelectenerg-1260	16	1	this	this	PRON
fuelectenerg-1260	16	2	is	be	AUX
fuelectenerg-1260	16	3	because	because	SCONJ
fuelectenerg-1260	16	4	development	development	NOUN
fuelectenerg-1260	16	5	requires	require	VERB
fuelectenerg-1260	16	6	adequate	adequate	ADJ
fuelectenerg-1260	16	7	tools	tool	NOUN
fuelectenerg-1260	16	8	with	with	ADP
fuelectenerg-1260	16	9	powerful	powerful	ADJ
fuelectenerg-1260	16	10	modelling	modelling	NOUN
fuelectenerg-1260	16	11	and	and	CCONJ
fuelectenerg-1260	16	12	simulation	simulation	NOUN
fuelectenerg-1260	16	13	software	software	NOUN
fuelectenerg-1260	16	14	to	to	PART
fuelectenerg-1260	16	15	reduce	reduce	VERB
fuelectenerg-1260	16	16	the	the	DET
fuelectenerg-1260	16	17	prototyping	prototyping	NOUN
fuelectenerg-1260	16	18	and	and	CCONJ
fuelectenerg-1260	16	19	received	receive	VERB
fuelectenerg-1260	16	20	september	september	PROPN
fuelectenerg-1260	16	21	19	19	NUM
fuelectenerg-1260	16	22	,	,	PUNCT
fuelectenerg-1260	16	23	2015	2015	NUM
fuelectenerg-1260	16	24	corresponding	correspond	VERB
fuelectenerg-1260	16	25	author	author	NOUN
fuelectenerg-1260	16	26	:	:	PUNCT
fuelectenerg-1260	16	27	renate	renate	NOUN
fuelectenerg-1260	16	28	sitte	sitte	PROPN
fuelectenerg-1260	16	29	griffith	griffith	PROPN
fuelectenerg-1260	16	30	university	university	PROPN
fuelectenerg-1260	16	31	,	,	PUNCT
fuelectenerg-1260	16	32	griffith	griffith	PROPN
fuelectenerg-1260	16	33	sciences	sciences	PROPN
fuelectenerg-1260	16	34	–	–	PUNCT
fuelectenerg-1260	16	35	ict	ict	NOUN
fuelectenerg-1260	16	36	,	,	PUNCT
fuelectenerg-1260	16	37	gold	gold	NOUN
fuelectenerg-1260	16	38	coast	coast	NOUN
fuelectenerg-1260	16	39	,	,	PUNCT
fuelectenerg-1260	16	40	australia	australia	PROPN
fuelectenerg-1260	16	41	(	(	PUNCT
fuelectenerg-1260	16	42	e	e	NOUN
fuelectenerg-1260	16	43	-	-	NOUN
fuelectenerg-1260	17	1	mail	mail	NOUN
fuelectenerg-1260	17	2	:	:	PUNCT
fuelectenerg-1260	17	3	r.sitte@griffith.edu.au	r.sitte@griffith.edu.au	NOUN
fuelectenerg-1260	17	4	)	)	PUNCT
fuelectenerg-1260	17	5	https://www.griffith.edu.au/griffith-sciences	https://www.griffith.edu.au/griffith-science	NOUN
fuelectenerg-1260	17	6	12	12	NUM
fuelectenerg-1260	17	7	r.	r.	PROPN
fuelectenerg-1260	17	8	sitte	sitte	PROPN
fuelectenerg-1260	17	9	optimization	optimization	PROPN
fuelectenerg-1260	17	10	period	period	NOUN
fuelectenerg-1260	17	11	.	.	PUNCT
fuelectenerg-1260	18	1	the	the	DET
fuelectenerg-1260	18	2	introduction	introduction	NOUN
fuelectenerg-1260	18	3	of	of	ADP
fuelectenerg-1260	18	4	cad	cad	PROPN
fuelectenerg-1260	18	5	packages	package	NOUN
fuelectenerg-1260	18	6	was	be	AUX
fuelectenerg-1260	18	7	a	a	DET
fuelectenerg-1260	18	8	critical	critical	ADJ
fuelectenerg-1260	18	9	step	step	NOUN
fuelectenerg-1260	18	10	in	in	ADP
fuelectenerg-1260	18	11	the	the	DET
fuelectenerg-1260	18	12	widespread	widespread	ADJ
fuelectenerg-1260	18	13	development	development	NOUN
fuelectenerg-1260	18	14	of	of	ADP
fuelectenerg-1260	18	15	vlsi	vlsi	PROPN
fuelectenerg-1260	18	16	devices	device	NOUN
fuelectenerg-1260	18	17	and	and	CCONJ
fuelectenerg-1260	18	18	reduction	reduction	NOUN
fuelectenerg-1260	18	19	of	of	ADP
fuelectenerg-1260	18	20	the	the	DET
fuelectenerg-1260	18	21	design	design	NOUN
fuelectenerg-1260	18	22	and	and	CCONJ
fuelectenerg-1260	18	23	prototyping	prototyping	NOUN
fuelectenerg-1260	18	24	phase	phase	NOUN
fuelectenerg-1260	18	25	[	[	X
fuelectenerg-1260	18	26	1	1	NUM
fuelectenerg-1260	18	27	]	]	PUNCT
fuelectenerg-1260	18	28	.	.	PUNCT
fuelectenerg-1260	19	1	despite	despite	SCONJ
fuelectenerg-1260	19	2	the	the	DET
fuelectenerg-1260	19	3	demand	demand	NOUN
fuelectenerg-1260	19	4	,	,	PUNCT
fuelectenerg-1260	19	5	there	there	PRON
fuelectenerg-1260	19	6	is	be	VERB
fuelectenerg-1260	19	7	a	a	DET
fuelectenerg-1260	19	8	lack	lack	NOUN
fuelectenerg-1260	19	9	of	of	ADP
fuelectenerg-1260	19	10	cad	cad	NOUN
fuelectenerg-1260	19	11	tools	tool	NOUN
fuelectenerg-1260	19	12	to	to	PART
fuelectenerg-1260	19	13	aid	aid	VERB
fuelectenerg-1260	19	14	in	in	ADP
fuelectenerg-1260	19	15	the	the	DET
fuelectenerg-1260	19	16	development	development	NOUN
fuelectenerg-1260	19	17	of	of	ADP
fuelectenerg-1260	19	18	mems	mem	NOUN
fuelectenerg-1260	19	19	devices	device	NOUN
fuelectenerg-1260	19	20	.	.	PUNCT
fuelectenerg-1260	20	1	there	there	PRON
fuelectenerg-1260	20	2	are	be	VERB
fuelectenerg-1260	20	3	several	several	ADJ
fuelectenerg-1260	20	4	packages	package	NOUN
fuelectenerg-1260	20	5	available	available	ADJ
fuelectenerg-1260	20	6	and	and	CCONJ
fuelectenerg-1260	20	7	their	their	PRON
fuelectenerg-1260	20	8	benefit	benefit	NOUN
fuelectenerg-1260	20	9	is	be	AUX
fuelectenerg-1260	20	10	supporting	support	VERB
fuelectenerg-1260	20	11	the	the	DET
fuelectenerg-1260	20	12	mathematical	mathematical	ADJ
fuelectenerg-1260	20	13	modelling	modelling	NOUN
fuelectenerg-1260	20	14	part	part	NOUN
fuelectenerg-1260	20	15	,	,	PUNCT
fuelectenerg-1260	20	16	but	but	CCONJ
fuelectenerg-1260	20	17	for	for	ADP
fuelectenerg-1260	20	18	a	a	DET
fuelectenerg-1260	20	19	realistic	realistic	ADJ
fuelectenerg-1260	20	20	and	and	CCONJ
fuelectenerg-1260	20	21	useful	useful	ADJ
fuelectenerg-1260	20	22	application	application	NOUN
fuelectenerg-1260	20	23	,	,	PUNCT
fuelectenerg-1260	20	24	they	they	PRON
fuelectenerg-1260	20	25	still	still	ADV
fuelectenerg-1260	20	26	require	require	VERB
fuelectenerg-1260	20	27	a	a	DET
fuelectenerg-1260	20	28	strong	strong	ADJ
fuelectenerg-1260	20	29	interdisciplinary	interdisciplinary	ADJ
fuelectenerg-1260	20	30	background	background	NOUN
fuelectenerg-1260	20	31	.	.	PUNCT
fuelectenerg-1260	21	1	in	in	ADP
fuelectenerg-1260	21	2	computing	compute	VERB
fuelectenerg-1260	21	3	for	for	ADP
fuelectenerg-1260	21	4	example	example	NOUN
fuelectenerg-1260	21	5	,	,	PUNCT
fuelectenerg-1260	21	6	the	the	DET
fuelectenerg-1260	21	7	introduction	introduction	NOUN
fuelectenerg-1260	21	8	of	of	ADP
fuelectenerg-1260	21	9	icons	icon	NOUN
fuelectenerg-1260	21	10	and	and	CCONJ
fuelectenerg-1260	21	11	mouse	mouse	NOUN
fuelectenerg-1260	21	12	in	in	ADP
fuelectenerg-1260	21	13	the	the	DET
fuelectenerg-1260	21	14	early	early	ADJ
fuelectenerg-1260	21	15	eighties	eighty	NOUN
fuelectenerg-1260	21	16	made	make	VERB
fuelectenerg-1260	21	17	a	a	DET
fuelectenerg-1260	21	18	huge	huge	ADJ
fuelectenerg-1260	21	19	impact	impact	NOUN
fuelectenerg-1260	21	20	and	and	CCONJ
fuelectenerg-1260	21	21	breakthrough	breakthrough	NOUN
fuelectenerg-1260	21	22	for	for	ADP
fuelectenerg-1260	21	23	shortcuts	shortcut	NOUN
fuelectenerg-1260	21	24	of	of	ADP
fuelectenerg-1260	21	25	recurring	recur	VERB
fuelectenerg-1260	21	26	tasks	task	NOUN
fuelectenerg-1260	21	27	like	like	ADP
fuelectenerg-1260	21	28	file	file	NOUN
fuelectenerg-1260	21	29	handling	handling	NOUN
fuelectenerg-1260	21	30	,	,	PUNCT
fuelectenerg-1260	21	31	starting	start	VERB
fuelectenerg-1260	21	32	programs	program	NOUN
fuelectenerg-1260	21	33	drawing	draw	VERB
fuelectenerg-1260	21	34	and	and	CCONJ
fuelectenerg-1260	21	35	visual	visual	ADJ
fuelectenerg-1260	21	36	output	output	NOUN
fuelectenerg-1260	21	37	.	.	PUNCT
fuelectenerg-1260	22	1	this	this	PRON
fuelectenerg-1260	22	2	allowed	allow	VERB
fuelectenerg-1260	22	3	focusing	focus	VERB
fuelectenerg-1260	22	4	more	more	ADV
fuelectenerg-1260	22	5	on	on	ADP
fuelectenerg-1260	22	6	using	use	VERB
fuelectenerg-1260	22	7	the	the	DET
fuelectenerg-1260	22	8	computer	computer	NOUN
fuelectenerg-1260	22	9	than	than	ADP
fuelectenerg-1260	22	10	typing	type	VERB
fuelectenerg-1260	22	11	commands	command	NOUN
fuelectenerg-1260	22	12	for	for	ADP
fuelectenerg-1260	22	13	menial	menial	ADJ
fuelectenerg-1260	22	14	tasks	task	NOUN
fuelectenerg-1260	22	15	.	.	PUNCT
fuelectenerg-1260	23	1	suddenly	suddenly	ADV
fuelectenerg-1260	23	2	,	,	PUNCT
fuelectenerg-1260	23	3	it	it	PRON
fuelectenerg-1260	23	4	allowed	allow	VERB
fuelectenerg-1260	23	5	a	a	DET
fuelectenerg-1260	23	6	broader	broad	ADJ
fuelectenerg-1260	23	7	audience	audience	NOUN
fuelectenerg-1260	23	8	to	to	PART
fuelectenerg-1260	23	9	use	use	VERB
fuelectenerg-1260	23	10	a	a	DET
fuelectenerg-1260	23	11	computer	computer	NOUN
fuelectenerg-1260	23	12	.	.	PUNCT
fuelectenerg-1260	24	1	we	we	PRON
fuelectenerg-1260	24	2	need	need	VERB
fuelectenerg-1260	24	3	to	to	PART
fuelectenerg-1260	24	4	be	be	AUX
fuelectenerg-1260	24	5	able	able	ADJ
fuelectenerg-1260	24	6	to	to	PART
fuelectenerg-1260	24	7	bring	bring	VERB
fuelectenerg-1260	24	8	mems	mem	NOUN
fuelectenerg-1260	24	9	design	design	NOUN
fuelectenerg-1260	24	10	to	to	ADP
fuelectenerg-1260	24	11	a	a	DET
fuelectenerg-1260	24	12	less	less	ADV
fuelectenerg-1260	24	13	specialized	specialized	ADJ
fuelectenerg-1260	24	14	audience	audience	NOUN
fuelectenerg-1260	24	15	.	.	PUNCT
fuelectenerg-1260	25	1	other	other	ADJ
fuelectenerg-1260	25	2	engineering	engineering	NOUN
fuelectenerg-1260	25	3	disciplines	discipline	NOUN
fuelectenerg-1260	25	4	,	,	PUNCT
fuelectenerg-1260	25	5	such	such	ADJ
fuelectenerg-1260	25	6	as	as	ADP
fuelectenerg-1260	25	7	mechanics	mechanic	NOUN
fuelectenerg-1260	25	8	or	or	CCONJ
fuelectenerg-1260	25	9	robotics	robotic	NOUN
fuelectenerg-1260	25	10	have	have	AUX
fuelectenerg-1260	25	11	found	find	VERB
fuelectenerg-1260	25	12	their	their	PRON
fuelectenerg-1260	25	13	way	way	NOUN
fuelectenerg-1260	25	14	into	into	ADP
fuelectenerg-1260	25	15	early	early	ADJ
fuelectenerg-1260	25	16	education	education	NOUN
fuelectenerg-1260	25	17	and	and	CCONJ
fuelectenerg-1260	25	18	entertainment	entertainment	NOUN
fuelectenerg-1260	25	19	(	(	PUNCT
fuelectenerg-1260	25	20	edutainment	edutainment	NOUN
fuelectenerg-1260	25	21	)	)	PUNCT
fuelectenerg-1260	25	22	.	.	PUNCT
fuelectenerg-1260	26	1	despite	despite	SCONJ
fuelectenerg-1260	26	2	their	their	PRON
fuelectenerg-1260	26	3	ballooning	ballooning	NOUN
fuelectenerg-1260	26	4	ubiquitosity	ubiquitosity	NOUN
fuelectenerg-1260	26	5	and	and	CCONJ
fuelectenerg-1260	26	6	breakthrough	breakthrough	NOUN
fuelectenerg-1260	26	7	as	as	ADP
fuelectenerg-1260	26	8	,	,	PUNCT
fuelectenerg-1260	26	9	for	for	ADP
fuelectenerg-1260	26	10	example	example	NOUN
fuelectenerg-1260	26	11	,	,	PUNCT
fuelectenerg-1260	26	12	in	in	ADP
fuelectenerg-1260	26	13	biomedical	biomedical	ADJ
fuelectenerg-1260	26	14	applications	application	NOUN
fuelectenerg-1260	26	15	,	,	PUNCT
fuelectenerg-1260	26	16	mems	mem	NOUN
fuelectenerg-1260	26	17	are	be	AUX
fuelectenerg-1260	26	18	not	not	PART
fuelectenerg-1260	26	19	yet	yet	ADV
fuelectenerg-1260	26	20	ready	ready	ADJ
fuelectenerg-1260	26	21	for	for	ADP
fuelectenerg-1260	26	22	edutainment	edutainment	NOUN
fuelectenerg-1260	26	23	,	,	PUNCT
fuelectenerg-1260	26	24	which	which	PRON
fuelectenerg-1260	26	25	has	have	VERB
fuelectenerg-1260	26	26	undoubtedly	undoubtedly	ADV
fuelectenerg-1260	26	27	a	a	DET
fuelectenerg-1260	26	28	favourable	favourable	ADJ
fuelectenerg-1260	26	29	effect	effect	NOUN
fuelectenerg-1260	26	30	for	for	ADP
fuelectenerg-1260	26	31	a	a	DET
fuelectenerg-1260	26	32	richer	rich	ADJ
fuelectenerg-1260	26	33	understanding	understanding	NOUN
fuelectenerg-1260	26	34	of	of	ADP
fuelectenerg-1260	26	35	physical	physical	ADJ
fuelectenerg-1260	26	36	cause	cause	NOUN
fuelectenerg-1260	26	37	-	-	PUNCT
fuelectenerg-1260	26	38	and	and	CCONJ
fuelectenerg-1260	26	39	-	-	PUNCT
fuelectenerg-1260	26	40	effect	effect	NOUN
fuelectenerg-1260	26	41	and	and	CCONJ
fuelectenerg-1260	26	42	shaping	shaping	NOUN
fuelectenerg-1260	26	43	of	of	ADP
fuelectenerg-1260	26	44	the	the	DET
fuelectenerg-1260	26	45	mind	mind	NOUN
fuelectenerg-1260	26	46	in	in	ADP
fuelectenerg-1260	26	47	younger	young	ADJ
fuelectenerg-1260	26	48	years	year	NOUN
fuelectenerg-1260	26	49	.	.	PUNCT
fuelectenerg-1260	27	1	it	it	PRON
fuelectenerg-1260	27	2	will	will	AUX
fuelectenerg-1260	27	3	be	be	AUX
fuelectenerg-1260	27	4	many	many	ADJ
fuelectenerg-1260	27	5	years	year	NOUN
fuelectenerg-1260	27	6	before	before	SCONJ
fuelectenerg-1260	27	7	mems	mem	NOUN
fuelectenerg-1260	27	8	design	design	NOUN
fuelectenerg-1260	27	9	can	can	AUX
fuelectenerg-1260	27	10	be	be	AUX
fuelectenerg-1260	27	11	simplified	simplify	VERB
fuelectenerg-1260	27	12	to	to	ADP
fuelectenerg-1260	27	13	the	the	DET
fuelectenerg-1260	27	14	point	point	NOUN
fuelectenerg-1260	27	15	of	of	ADP
fuelectenerg-1260	27	16	pick	pick	NOUN
fuelectenerg-1260	27	17	and	and	CCONJ
fuelectenerg-1260	27	18	place	place	NOUN
fuelectenerg-1260	27	19	on	on	ADP
fuelectenerg-1260	27	20	a	a	DET
fuelectenerg-1260	27	21	virtual	virtual	ADJ
fuelectenerg-1260	27	22	prototyping	prototyping	NOUN
fuelectenerg-1260	27	23	(	(	PUNCT
fuelectenerg-1260	27	24	vp	vp	NOUN
fuelectenerg-1260	27	25	)	)	PUNCT
fuelectenerg-1260	27	26	computer	computer	NOUN
fuelectenerg-1260	27	27	screen	screen	NOUN
fuelectenerg-1260	27	28	,	,	PUNCT
fuelectenerg-1260	27	29	and	and	CCONJ
fuelectenerg-1260	27	30	see	see	VERB
fuelectenerg-1260	27	31	it	it	PRON
fuelectenerg-1260	27	32	functioning	function	VERB
fuelectenerg-1260	27	33	in	in	ADP
fuelectenerg-1260	27	34	3d	3d	PROPN
fuelectenerg-1260	27	35	and	and	CCONJ
fuelectenerg-1260	27	36	4d	4d	NUM
fuelectenerg-1260	27	37	vp	vp	PROPN
fuelectenerg-1260	28	1	.	.	PUNCT
fuelectenerg-1260	28	2	mems	mems	PROPN
fuelectenerg-1260	28	3	can	can	AUX
fuelectenerg-1260	28	4	nowadays	nowadays	ADV
fuelectenerg-1260	28	5	be	be	AUX
fuelectenerg-1260	28	6	made	make	VERB
fuelectenerg-1260	28	7	of	of	ADP
fuelectenerg-1260	28	8	a	a	DET
fuelectenerg-1260	28	9	range	range	NOUN
fuelectenerg-1260	28	10	of	of	ADP
fuelectenerg-1260	28	11	materials	material	NOUN
fuelectenerg-1260	28	12	,	,	PUNCT
fuelectenerg-1260	28	13	not	not	PART
fuelectenerg-1260	28	14	just	just	ADV
fuelectenerg-1260	28	15	silicon	silicon	NOUN
fuelectenerg-1260	28	16	.	.	PUNCT
fuelectenerg-1260	29	1	those	those	DET
fuelectenerg-1260	29	2	materials	material	NOUN
fuelectenerg-1260	29	3	have	have	VERB
fuelectenerg-1260	29	4	different	different	ADJ
fuelectenerg-1260	29	5	physical	physical	ADJ
fuelectenerg-1260	29	6	properties	property	NOUN
fuelectenerg-1260	29	7	and	and	CCONJ
fuelectenerg-1260	29	8	behave	behave	VERB
fuelectenerg-1260	29	9	differently	differently	ADV
fuelectenerg-1260	29	10	in	in	ADP
fuelectenerg-1260	29	11	manufacture	manufacture	NOUN
fuelectenerg-1260	29	12	and	and	CCONJ
fuelectenerg-1260	29	13	use	use	NOUN
fuelectenerg-1260	29	14	.	.	PUNCT
fuelectenerg-1260	30	1	therefore	therefore	ADV
fuelectenerg-1260	30	2	a	a	DET
fuelectenerg-1260	30	3	virtual	virtual	ADJ
fuelectenerg-1260	30	4	reality	reality	NOUN
fuelectenerg-1260	30	5	(	(	PUNCT
fuelectenerg-1260	30	6	vr	vr	NOUN
fuelectenerg-1260	30	7	)	)	PUNCT
fuelectenerg-1260	30	8	computer	computer	NOUN
fuelectenerg-1260	30	9	aided	aid	VERB
fuelectenerg-1260	30	10	design	design	NOUN
fuelectenerg-1260	30	11	(	(	PUNCT
fuelectenerg-1260	30	12	cad	cad	NOUN
fuelectenerg-1260	30	13	)	)	PUNCT
fuelectenerg-1260	30	14	software	software	NOUN
fuelectenerg-1260	30	15	that	that	PRON
fuelectenerg-1260	30	16	can	can	AUX
fuelectenerg-1260	30	17	mimic	mimic	VERB
fuelectenerg-1260	30	18	functioning	function	VERB
fuelectenerg-1260	30	19	with	with	ADP
fuelectenerg-1260	30	20	physically	physically	ADV
fuelectenerg-1260	30	21	correct	correct	ADJ
fuelectenerg-1260	30	22	results	result	NOUN
fuelectenerg-1260	30	23	can	can	AUX
fuelectenerg-1260	30	24	be	be	AUX
fuelectenerg-1260	30	25	the	the	DET
fuelectenerg-1260	30	26	meccano	meccano	NOUN
fuelectenerg-1260	30	27	or	or	CCONJ
fuelectenerg-1260	30	28	lego	lego	NOUN
fuelectenerg-1260	30	29	toy	toy	NOUN
fuelectenerg-1260	30	30	for	for	ADP
fuelectenerg-1260	30	31	edutainment	edutainment	NOUN
fuelectenerg-1260	30	32	and	and	CCONJ
fuelectenerg-1260	30	33	discovery	discovery	PROPN
fuelectenerg-1260	30	34	(	(	PUNCT
fuelectenerg-1260	30	35	acquiring	acquire	VERB
fuelectenerg-1260	30	36	an	an	DET
fuelectenerg-1260	30	37	intuition	intuition	NOUN
fuelectenerg-1260	30	38	)	)	PUNCT
fuelectenerg-1260	30	39	at	at	ADP
fuelectenerg-1260	30	40	earlier	early	ADJ
fuelectenerg-1260	30	41	ages	age	NOUN
fuelectenerg-1260	30	42	than	than	ADP
fuelectenerg-1260	30	43	postgraduates	postgraduate	NOUN
fuelectenerg-1260	30	44	.	.	PUNCT
fuelectenerg-1260	31	1	our	our	PRON
fuelectenerg-1260	31	2	aim	aim	NOUN
fuelectenerg-1260	31	3	should	should	AUX
fuelectenerg-1260	31	4	be	be	AUX
fuelectenerg-1260	31	5	making	make	VERB
fuelectenerg-1260	31	6	the	the	DET
fuelectenerg-1260	31	7	whole	whole	ADJ
fuelectenerg-1260	31	8	mems	mem	NOUN
fuelectenerg-1260	31	9	domain	domain	NOUN
fuelectenerg-1260	31	10	more	more	ADV
fuelectenerg-1260	31	11	popular	popular	ADJ
fuelectenerg-1260	31	12	.	.	PUNCT
fuelectenerg-1260	32	1	this	this	PRON
fuelectenerg-1260	32	2	could	could	AUX
fuelectenerg-1260	32	3	be	be	AUX
fuelectenerg-1260	32	4	by	by	ADP
fuelectenerg-1260	32	5	bringing	bring	VERB
fuelectenerg-1260	32	6	it	it	PRON
fuelectenerg-1260	32	7	to	to	PART
fuelectenerg-1260	32	8	undergraduate	undergraduate	VERB
fuelectenerg-1260	32	9	or	or	CCONJ
fuelectenerg-1260	32	10	even	even	ADV
fuelectenerg-1260	32	11	final	final	ADJ
fuelectenerg-1260	32	12	years	year	NOUN
fuelectenerg-1260	32	13	of	of	ADP
fuelectenerg-1260	32	14	high	high	ADJ
fuelectenerg-1260	32	15	school	school	NOUN
fuelectenerg-1260	32	16	level	level	NOUN
fuelectenerg-1260	32	17	with	with	ADP
fuelectenerg-1260	32	18	introductory	introductory	ADJ
fuelectenerg-1260	32	19	courses	course	NOUN
fuelectenerg-1260	32	20	and	and	CCONJ
fuelectenerg-1260	32	21	gradually	gradually	ADV
fuelectenerg-1260	32	22	adding	add	VERB
fuelectenerg-1260	32	23	more	more	ADV
fuelectenerg-1260	32	24	ambitious	ambitious	ADJ
fuelectenerg-1260	32	25	courses	course	NOUN
fuelectenerg-1260	32	26	in	in	ADP
fuelectenerg-1260	32	27	a	a	DET
fuelectenerg-1260	32	28	similar	similar	ADJ
fuelectenerg-1260	32	29	way	way	NOUN
fuelectenerg-1260	32	30	,	,	PUNCT
fuelectenerg-1260	32	31	as	as	SCONJ
fuelectenerg-1260	32	32	introductory	introductory	ADJ
fuelectenerg-1260	32	33	mathematics	mathematic	NOUN
fuelectenerg-1260	32	34	courses	course	NOUN
fuelectenerg-1260	32	35	are	be	AUX
fuelectenerg-1260	32	36	taught	teach	VERB
fuelectenerg-1260	32	37	early	early	ADV
fuelectenerg-1260	32	38	on	on	ADV
fuelectenerg-1260	32	39	,	,	PUNCT
fuelectenerg-1260	32	40	shaping	shape	VERB
fuelectenerg-1260	32	41	the	the	DET
fuelectenerg-1260	32	42	mind	mind	NOUN
fuelectenerg-1260	32	43	.	.	PUNCT
fuelectenerg-1260	33	1	to	to	PART
fuelectenerg-1260	33	2	achieve	achieve	VERB
fuelectenerg-1260	33	3	that	that	PRON
fuelectenerg-1260	33	4	,	,	PUNCT
fuelectenerg-1260	33	5	we	we	PRON
fuelectenerg-1260	33	6	need	need	VERB
fuelectenerg-1260	33	7	simulation	simulation	NOUN
fuelectenerg-1260	33	8	tools	tool	NOUN
fuelectenerg-1260	33	9	that	that	PRON
fuelectenerg-1260	33	10	are	be	AUX
fuelectenerg-1260	33	11	easy	easy	ADJ
fuelectenerg-1260	33	12	to	to	PART
fuelectenerg-1260	33	13	use	use	VERB
fuelectenerg-1260	33	14	and	and	CCONJ
fuelectenerg-1260	33	15	to	to	PART
fuelectenerg-1260	33	16	understand	understand	VERB
fuelectenerg-1260	33	17	.	.	PUNCT
fuelectenerg-1260	34	1	just	just	ADV
fuelectenerg-1260	34	2	the	the	DET
fuelectenerg-1260	34	3	lengthy	lengthy	ADJ
fuelectenerg-1260	34	4	training	training	NOUN
fuelectenerg-1260	34	5	time	time	NOUN
fuelectenerg-1260	34	6	to	to	PART
fuelectenerg-1260	34	7	handle	handle	VERB
fuelectenerg-1260	34	8	the	the	DET
fuelectenerg-1260	34	9	software	software	NOUN
fuelectenerg-1260	34	10	tools	tool	NOUN
fuelectenerg-1260	34	11	and	and	CCONJ
fuelectenerg-1260	34	12	time	time	NOUN
fuelectenerg-1260	34	13	their	their	PRON
fuelectenerg-1260	34	14	calculations	calculation	NOUN
fuelectenerg-1260	34	15	take	take	VERB
fuelectenerg-1260	34	16	is	be	AUX
fuelectenerg-1260	34	17	a	a	DET
fuelectenerg-1260	34	18	discouragement	discouragement	NOUN
fuelectenerg-1260	34	19	.	.	PUNCT
fuelectenerg-1260	35	1	novices	novice	NOUN
fuelectenerg-1260	35	2	do	do	AUX
fuelectenerg-1260	35	3	not	not	PART
fuelectenerg-1260	35	4	have	have	VERB
fuelectenerg-1260	35	5	the	the	DET
fuelectenerg-1260	35	6	patience	patience	NOUN
fuelectenerg-1260	35	7	or	or	CCONJ
fuelectenerg-1260	35	8	the	the	DET
fuelectenerg-1260	35	9	maturity	maturity	NOUN
fuelectenerg-1260	35	10	to	to	PART
fuelectenerg-1260	35	11	wait	wait	VERB
fuelectenerg-1260	35	12	for	for	ADP
fuelectenerg-1260	35	13	something	something	PRON
fuelectenerg-1260	35	14	they	they	PRON
fuelectenerg-1260	35	15	have	have	VERB
fuelectenerg-1260	35	16	neither	neither	CCONJ
fuelectenerg-1260	35	17	background	background	NOUN
fuelectenerg-1260	35	18	nor	nor	CCONJ
fuelectenerg-1260	35	19	meaning	meaning	NOUN
fuelectenerg-1260	35	20	.	.	PUNCT
fuelectenerg-1260	36	1	the	the	DET
fuelectenerg-1260	36	2	bottleneck	bottleneck	NOUN
fuelectenerg-1260	36	3	is	be	AUX
fuelectenerg-1260	36	4	no	no	ADV
fuelectenerg-1260	36	5	longer	long	ADV
fuelectenerg-1260	36	6	the	the	DET
fuelectenerg-1260	36	7	computing	computing	NOUN
fuelectenerg-1260	36	8	power	power	NOUN
fuelectenerg-1260	36	9	but	but	CCONJ
fuelectenerg-1260	36	10	having	have	VERB
fuelectenerg-1260	36	11	usable	usable	ADJ
fuelectenerg-1260	36	12	and	and	CCONJ
fuelectenerg-1260	36	13	curiosity	curiosity	NOUN
fuelectenerg-1260	36	14	stimulating	stimulate	VERB
fuelectenerg-1260	36	15	simulation	simulation	NOUN
fuelectenerg-1260	36	16	tools	tool	NOUN
fuelectenerg-1260	36	17	for	for	ADP
fuelectenerg-1260	36	18	the	the	DET
fuelectenerg-1260	36	19	uninitiated	uninitiated	ADJ
fuelectenerg-1260	36	20	.	.	PUNCT
fuelectenerg-1260	37	1	our	our	PRON
fuelectenerg-1260	37	2	research	research	NOUN
fuelectenerg-1260	37	3	has	have	AUX
fuelectenerg-1260	37	4	developed	develop	VERB
fuelectenerg-1260	37	5	techniques	technique	NOUN
fuelectenerg-1260	37	6	suitable	suitable	ADJ
fuelectenerg-1260	37	7	for	for	ADP
fuelectenerg-1260	37	8	virtual	virtual	ADJ
fuelectenerg-1260	37	9	prototyping	prototyping	NOUN
fuelectenerg-1260	37	10	that	that	PRON
fuelectenerg-1260	37	11	reduce	reduce	VERB
fuelectenerg-1260	37	12	the	the	DET
fuelectenerg-1260	37	13	calculation	calculation	NOUN
fuelectenerg-1260	37	14	time	time	NOUN
fuelectenerg-1260	37	15	without	without	ADP
fuelectenerg-1260	37	16	sacrificing	sacrifice	VERB
fuelectenerg-1260	37	17	physical	physical	ADJ
fuelectenerg-1260	37	18	correctness	correctness	NOUN
fuelectenerg-1260	37	19	.	.	PUNCT
fuelectenerg-1260	38	1	our	our	PRON
fuelectenerg-1260	38	2	methods	method	NOUN
fuelectenerg-1260	38	3	are	be	AUX
fuelectenerg-1260	38	4	suitable	suitable	ADJ
fuelectenerg-1260	38	5	for	for	ADP
fuelectenerg-1260	38	6	initial	initial	ADJ
fuelectenerg-1260	38	7	design	design	NOUN
fuelectenerg-1260	38	8	that	that	PRON
fuelectenerg-1260	38	9	can	can	AUX
fuelectenerg-1260	38	10	then	then	ADV
fuelectenerg-1260	38	11	be	be	AUX
fuelectenerg-1260	38	12	refined	refine	VERB
fuelectenerg-1260	38	13	with	with	ADP
fuelectenerg-1260	38	14	conventional	conventional	ADJ
fuelectenerg-1260	38	15	methods	method	NOUN
fuelectenerg-1260	38	16	.	.	PUNCT
fuelectenerg-1260	39	1	it	it	PRON
fuelectenerg-1260	39	2	serves	serve	VERB
fuelectenerg-1260	39	3	for	for	ADP
fuelectenerg-1260	39	4	advanced	advanced	ADJ
fuelectenerg-1260	39	5	researchers	researcher	NOUN
fuelectenerg-1260	39	6	and	and	CCONJ
fuelectenerg-1260	39	7	novices	novice	NOUN
fuelectenerg-1260	39	8	alike	alike	ADV
fuelectenerg-1260	39	9	.	.	PUNCT
fuelectenerg-1260	40	1	the	the	DET
fuelectenerg-1260	40	2	paper	paper	NOUN
fuelectenerg-1260	40	3	is	be	AUX
fuelectenerg-1260	40	4	organized	organize	VERB
fuelectenerg-1260	40	5	in	in	ADP
fuelectenerg-1260	40	6	the	the	DET
fuelectenerg-1260	40	7	following	following	ADJ
fuelectenerg-1260	40	8	way	way	NOUN
fuelectenerg-1260	40	9	:	:	PUNCT
fuelectenerg-1260	40	10	overall	overall	ADV
fuelectenerg-1260	40	11	,	,	PUNCT
fuelectenerg-1260	40	12	we	we	PRON
fuelectenerg-1260	40	13	progress	progress	VERB
fuelectenerg-1260	40	14	throughout	throughout	ADP
fuelectenerg-1260	40	15	the	the	DET
fuelectenerg-1260	40	16	following	follow	VERB
fuelectenerg-1260	40	17	sections	section	NOUN
fuelectenerg-1260	40	18	towards	towards	ADP
fuelectenerg-1260	40	19	mems	mems	ADJ
fuelectenerg-1260	40	20	virtual	virtual	ADJ
fuelectenerg-1260	40	21	prototyping	prototyping	NOUN
fuelectenerg-1260	40	22	.	.	PUNCT
fuelectenerg-1260	41	1	section	section	NOUN
fuelectenerg-1260	41	2	2	2	NUM
fuelectenerg-1260	41	3	brings	bring	VERB
fuelectenerg-1260	41	4	some	some	DET
fuelectenerg-1260	41	5	background	background	NOUN
fuelectenerg-1260	41	6	and	and	CCONJ
fuelectenerg-1260	41	7	context	context	NOUN
fuelectenerg-1260	41	8	about	about	ADP
fuelectenerg-1260	41	9	the	the	DET
fuelectenerg-1260	41	10	wide	wide	ADJ
fuelectenerg-1260	41	11	range	range	NOUN
fuelectenerg-1260	41	12	of	of	ADP
fuelectenerg-1260	41	13	applications	application	NOUN
fuelectenerg-1260	41	14	,	,	PUNCT
fuelectenerg-1260	41	15	product	product	NOUN
fuelectenerg-1260	41	16	ramifications	ramification	NOUN
fuelectenerg-1260	41	17	and	and	CCONJ
fuelectenerg-1260	41	18	variety	variety	NOUN
fuelectenerg-1260	41	19	of	of	ADP
fuelectenerg-1260	41	20	problems	problem	NOUN
fuelectenerg-1260	41	21	as	as	SCONJ
fuelectenerg-1260	41	22	mems	mem	NOUN
fuelectenerg-1260	41	23	have	have	AUX
fuelectenerg-1260	41	24	evolved	evolve	VERB
fuelectenerg-1260	41	25	in	in	ADP
fuelectenerg-1260	41	26	just	just	ADV
fuelectenerg-1260	41	27	two	two	NUM
fuelectenerg-1260	41	28	decades	decade	NOUN
fuelectenerg-1260	41	29	.	.	PUNCT
fuelectenerg-1260	42	1	section	section	NOUN
fuelectenerg-1260	42	2	three	three	NUM
fuelectenerg-1260	42	3	discusses	discuss	VERB
fuelectenerg-1260	42	4	existing	exist	VERB
fuelectenerg-1260	42	5	tools	tool	NOUN
fuelectenerg-1260	42	6	for	for	ADP
fuelectenerg-1260	42	7	mems	mem	NOUN
fuelectenerg-1260	42	8	modelling	modelling	NOUN
fuelectenerg-1260	42	9	and	and	CCONJ
fuelectenerg-1260	42	10	simulation	simulation	NOUN
fuelectenerg-1260	42	11	and	and	CCONJ
fuelectenerg-1260	42	12	moves	move	NOUN
fuelectenerg-1260	42	13	into	into	ADP
fuelectenerg-1260	42	14	existing	exist	VERB
fuelectenerg-1260	42	15	cad	cad	NOUN
fuelectenerg-1260	42	16	systems	system	NOUN
fuelectenerg-1260	42	17	.	.	PUNCT
fuelectenerg-1260	43	1	it	it	PRON
fuelectenerg-1260	43	2	explains	explain	VERB
fuelectenerg-1260	43	3	some	some	PRON
fuelectenerg-1260	43	4	of	of	ADP
fuelectenerg-1260	43	5	the	the	DET
fuelectenerg-1260	43	6	difficulties	difficulty	NOUN
fuelectenerg-1260	43	7	and	and	CCONJ
fuelectenerg-1260	43	8	complexities	complexity	NOUN
fuelectenerg-1260	43	9	affecting	affect	VERB
fuelectenerg-1260	43	10	reliability	reliability	NOUN
fuelectenerg-1260	43	11	in	in	ADP
fuelectenerg-1260	43	12	mems	mem	NOUN
fuelectenerg-1260	43	13	modelling	modelling	NOUN
fuelectenerg-1260	43	14	.	.	PUNCT
fuelectenerg-1260	44	1	chapter	chapter	NOUN
fuelectenerg-1260	44	2	four	four	NUM
fuelectenerg-1260	44	3	looks	look	VERB
fuelectenerg-1260	44	4	at	at	ADP
fuelectenerg-1260	44	5	the	the	DET
fuelectenerg-1260	44	6	importance	importance	NOUN
fuelectenerg-1260	44	7	of	of	ADP
fuelectenerg-1260	44	8	prototyping	prototyping	NOUN
fuelectenerg-1260	44	9	and	and	CCONJ
fuelectenerg-1260	44	10	its	its	PRON
fuelectenerg-1260	44	11	strong	strong	ADJ
fuelectenerg-1260	44	12	potential	potential	NOUN
fuelectenerg-1260	44	13	for	for	ADP
fuelectenerg-1260	44	14	innovation	innovation	NOUN
fuelectenerg-1260	44	15	.	.	PUNCT
fuelectenerg-1260	45	1	chapter	chapter	NOUN
fuelectenerg-1260	45	2	five	five	NUM
fuelectenerg-1260	45	3	discusses	discuss	VERB
fuelectenerg-1260	45	4	virtual	virtual	ADJ
fuelectenerg-1260	45	5	prototyping	prototyping	NOUN
fuelectenerg-1260	45	6	as	as	ADP
fuelectenerg-1260	45	7	an	an	DET
fuelectenerg-1260	45	8	important	important	ADJ
fuelectenerg-1260	45	9	and	and	CCONJ
fuelectenerg-1260	45	10	flexible	flexible	ADJ
fuelectenerg-1260	45	11	design	design	NOUN
fuelectenerg-1260	45	12	tool	tool	NOUN
fuelectenerg-1260	45	13	that	that	PRON
fuelectenerg-1260	45	14	has	have	AUX
fuelectenerg-1260	45	15	not	not	PART
fuelectenerg-1260	45	16	yet	yet	ADV
fuelectenerg-1260	45	17	really	really	ADV
fuelectenerg-1260	45	18	found	find	VERB
fuelectenerg-1260	45	19	its	its	PRON
fuelectenerg-1260	45	20	way	way	NOUN
fuelectenerg-1260	45	21	into	into	ADP
fuelectenerg-1260	45	22	mems	mem	NOUN
fuelectenerg-1260	45	23	design	design	NOUN
fuelectenerg-1260	45	24	.	.	PUNCT
fuelectenerg-1260	46	1	in	in	ADP
fuelectenerg-1260	46	2	chapter	chapter	NOUN
fuelectenerg-1260	46	3	six	six	NUM
fuelectenerg-1260	46	4	gives	give	VERB
fuelectenerg-1260	46	5	a	a	DET
fuelectenerg-1260	46	6	snapshot	snapshot	NOUN
fuelectenerg-1260	46	7	of	of	ADP
fuelectenerg-1260	46	8	our	our	PRON
fuelectenerg-1260	46	9	contribution	contribution	NOUN
fuelectenerg-1260	46	10	magda	magda	PROPN
fuelectenerg-1260	46	11	.	.	PUNCT
fuelectenerg-1260	47	1	it	it	PRON
fuelectenerg-1260	47	2	briefly	briefly	ADV
fuelectenerg-1260	47	3	explains	explain	VERB
fuelectenerg-1260	47	4	our	our	PRON
fuelectenerg-1260	47	5	fast	fast	ADJ
fuelectenerg-1260	47	6	algorithms	algorithms	NOUN
fuelectenerg-1260	47	7	that	that	PRON
fuelectenerg-1260	47	8	make	make	VERB
fuelectenerg-1260	47	9	the	the	DET
fuelectenerg-1260	47	10	difference	difference	NOUN
fuelectenerg-1260	47	11	for	for	ADP
fuelectenerg-1260	47	12	speedier	speedy	ADJ
fuelectenerg-1260	47	13	virtual	virtual	ADJ
fuelectenerg-1260	47	14	prototyping	prototyping	NOUN
fuelectenerg-1260	47	15	.	.	PUNCT
fuelectenerg-1260	48	1	the	the	DET
fuelectenerg-1260	48	2	last	last	ADJ
fuelectenerg-1260	48	3	section	section	NOUN
fuelectenerg-1260	48	4	concludes	conclude	VERB
fuelectenerg-1260	48	5	the	the	DET
fuelectenerg-1260	48	6	discussions	discussion	NOUN
fuelectenerg-1260	48	7	with	with	ADP
fuelectenerg-1260	48	8	suggestions	suggestion	NOUN
fuelectenerg-1260	48	9	for	for	ADP
fuelectenerg-1260	48	10	future	future	ADJ
fuelectenerg-1260	48	11	work	work	NOUN
fuelectenerg-1260	48	12	.	.	PUNCT
fuelectenerg-1260	49	1	mems	mem	NOUN
fuelectenerg-1260	49	2	design	design	NOUN
fuelectenerg-1260	49	3	simplification	simplification	NOUN
fuelectenerg-1260	49	4	with	with	ADP
fuelectenerg-1260	49	5	virtual	virtual	ADJ
fuelectenerg-1260	49	6	prototyping	prototype	VERB
fuelectenerg-1260	49	7	13	13	NUM
fuelectenerg-1260	49	8	2	2	NUM
fuelectenerg-1260	49	9	.	.	PUNCT
fuelectenerg-1260	49	10	background	background	NOUN
fuelectenerg-1260	49	11	and	and	CCONJ
fuelectenerg-1260	49	12	context	context	VERB
fuelectenerg-1260	49	13	this	this	DET
fuelectenerg-1260	49	14	section	section	NOUN
fuelectenerg-1260	49	15	looks	look	VERB
fuelectenerg-1260	49	16	into	into	ADP
fuelectenerg-1260	49	17	the	the	DET
fuelectenerg-1260	49	18	multidisciplinary	multidisciplinary	ADJ
fuelectenerg-1260	49	19	aspect	aspect	NOUN
fuelectenerg-1260	49	20	of	of	ADP
fuelectenerg-1260	49	21	mems	mem	NOUN
fuelectenerg-1260	49	22	.	.	PUNCT
fuelectenerg-1260	50	1	its	its	PRON
fuelectenerg-1260	50	2	main	main	ADJ
fuelectenerg-1260	50	3	purpose	purpose	NOUN
fuelectenerg-1260	50	4	is	be	AUX
fuelectenerg-1260	50	5	to	to	PART
fuelectenerg-1260	50	6	motivate	motivate	VERB
fuelectenerg-1260	50	7	and	and	CCONJ
fuelectenerg-1260	50	8	provide	provide	VERB
fuelectenerg-1260	50	9	context	context	NOUN
fuelectenerg-1260	50	10	towards	towards	ADP
fuelectenerg-1260	50	11	an	an	DET
fuelectenerg-1260	50	12	easier	easy	ADJ
fuelectenerg-1260	50	13	design	design	NOUN
fuelectenerg-1260	50	14	phase	phase	NOUN
fuelectenerg-1260	50	15	and	and	CCONJ
fuelectenerg-1260	50	16	virtual	virtual	ADJ
fuelectenerg-1260	50	17	prototyping	prototyping	NOUN
fuelectenerg-1260	50	18	(	(	PUNCT
fuelectenerg-1260	50	19	vp	vp	NOUN
fuelectenerg-1260	50	20	)	)	PUNCT
fuelectenerg-1260	50	21	and	and	CCONJ
fuelectenerg-1260	50	22	this	this	PRON
fuelectenerg-1260	50	23	is	be	AUX
fuelectenerg-1260	50	24	reflected	reflect	VERB
fuelectenerg-1260	50	25	in	in	ADP
fuelectenerg-1260	50	26	its	its	PRON
fuelectenerg-1260	50	27	literature	literature	NOUN
fuelectenerg-1260	50	28	review	review	NOUN
fuelectenerg-1260	50	29	.	.	PUNCT
fuelectenerg-1260	51	1	due	due	ADP
fuelectenerg-1260	51	2	to	to	ADP
fuelectenerg-1260	51	3	the	the	DET
fuelectenerg-1260	51	4	diversity	diversity	NOUN
fuelectenerg-1260	51	5	and	and	CCONJ
fuelectenerg-1260	51	6	amount	amount	NOUN
fuelectenerg-1260	51	7	of	of	ADP
fuelectenerg-1260	51	8	mems	mem	NOUN
fuelectenerg-1260	51	9	material	material	NOUN
fuelectenerg-1260	51	10	published	publish	VERB
fuelectenerg-1260	51	11	,	,	PUNCT
fuelectenerg-1260	51	12	this	this	DET
fuelectenerg-1260	51	13	paper	paper	NOUN
fuelectenerg-1260	51	14	does	do	VERB
fuelectenerg-1260	51	15	not	not	PART
fuelectenerg-1260	51	16	and	and	CCONJ
fuelectenerg-1260	51	17	can	can	AUX
fuelectenerg-1260	51	18	not	not	PART
fuelectenerg-1260	51	19	replace	replace	VERB
fuelectenerg-1260	51	20	review	review	NOUN
fuelectenerg-1260	51	21	papers	paper	NOUN
fuelectenerg-1260	51	22	.	.	PUNCT
fuelectenerg-1260	52	1	both	both	DET
fuelectenerg-1260	52	2	mems	mem	NOUN
fuelectenerg-1260	52	3	and	and	CCONJ
fuelectenerg-1260	52	4	vp	vp	PROPN
fuelectenerg-1260	52	5	are	be	AUX
fuelectenerg-1260	52	6	extensive	extensive	ADJ
fuelectenerg-1260	52	7	disciplines	discipline	NOUN
fuelectenerg-1260	52	8	with	with	ADP
fuelectenerg-1260	52	9	their	their	PRON
fuelectenerg-1260	52	10	own	own	ADJ
fuelectenerg-1260	52	11	specialization	specialization	NOUN
fuelectenerg-1260	52	12	branches	branch	NOUN
fuelectenerg-1260	52	13	.	.	PUNCT
fuelectenerg-1260	53	1	the	the	DET
fuelectenerg-1260	53	2	project	project	NOUN
fuelectenerg-1260	53	3	of	of	ADP
fuelectenerg-1260	53	4	vp	vp	PROPN
fuelectenerg-1260	53	5	for	for	ADP
fuelectenerg-1260	53	6	mems	mem	NOUN
fuelectenerg-1260	53	7	is	be	AUX
fuelectenerg-1260	53	8	huge	huge	ADJ
fuelectenerg-1260	53	9	and	and	CCONJ
fuelectenerg-1260	53	10	ambitious	ambitious	ADJ
fuelectenerg-1260	53	11	,	,	PUNCT
fuelectenerg-1260	53	12	and	and	CCONJ
fuelectenerg-1260	53	13	requires	require	VERB
fuelectenerg-1260	53	14	specialization	specialization	NOUN
fuelectenerg-1260	53	15	topics	topic	NOUN
fuelectenerg-1260	53	16	such	such	ADJ
fuelectenerg-1260	53	17	as	as	ADP
fuelectenerg-1260	53	18	for	for	ADP
fuelectenerg-1260	53	19	example	example	NOUN
fuelectenerg-1260	53	20	“	"	PUNCT
fuelectenerg-1260	53	21	physically	physically	ADV
fuelectenerg-1260	53	22	based	base	VERB
fuelectenerg-1260	53	23	rendering	rendering	NOUN
fuelectenerg-1260	53	24	”	"	PUNCT
fuelectenerg-1260	53	25	or	or	CCONJ
fuelectenerg-1260	53	26	“	"	PUNCT
fuelectenerg-1260	53	27	turbulent	turbulent	ADJ
fuelectenerg-1260	53	28	flow	flow	NOUN
fuelectenerg-1260	53	29	”	"	PUNCT
fuelectenerg-1260	53	30	and	and	CCONJ
fuelectenerg-1260	53	31	many	many	ADJ
fuelectenerg-1260	53	32	more	more	ADJ
fuelectenerg-1260	53	33	.	.	PUNCT
fuelectenerg-1260	54	1	such	such	ADJ
fuelectenerg-1260	54	2	topics	topic	NOUN
fuelectenerg-1260	54	3	require	require	VERB
fuelectenerg-1260	54	4	in	in	ADP
fuelectenerg-1260	54	5	-	-	PUNCT
fuelectenerg-1260	54	6	depth	depth	NOUN
fuelectenerg-1260	54	7	study	study	NOUN
fuelectenerg-1260	54	8	on	on	ADP
fuelectenerg-1260	54	9	their	their	PRON
fuelectenerg-1260	54	10	own	own	ADJ
fuelectenerg-1260	54	11	.	.	PUNCT
fuelectenerg-1260	55	1	the	the	DET
fuelectenerg-1260	55	2	project	project	NOUN
fuelectenerg-1260	55	3	also	also	ADV
fuelectenerg-1260	55	4	requires	require	VERB
fuelectenerg-1260	55	5	to	to	PART
fuelectenerg-1260	55	6	overcome	overcome	VERB
fuelectenerg-1260	55	7	the	the	DET
fuelectenerg-1260	55	8	old	old	ADJ
fuelectenerg-1260	55	9	dilemma	dilemma	NOUN
fuelectenerg-1260	55	10	that	that	SCONJ
fuelectenerg-1260	55	11	engineers	engineer	NOUN
fuelectenerg-1260	55	12	are	be	AUX
fuelectenerg-1260	55	13	weak	weak	ADJ
fuelectenerg-1260	55	14	programmers	programmer	NOUN
fuelectenerg-1260	55	15	,	,	PUNCT
fuelectenerg-1260	55	16	and	and	CCONJ
fuelectenerg-1260	55	17	software	software	NOUN
fuelectenerg-1260	55	18	developers	developer	NOUN
fuelectenerg-1260	55	19	are	be	AUX
fuelectenerg-1260	55	20	weak	weak	ADJ
fuelectenerg-1260	55	21	in	in	ADP
fuelectenerg-1260	55	22	science	science	NOUN
fuelectenerg-1260	55	23	and	and	CCONJ
fuelectenerg-1260	55	24	engineering	engineering	NOUN
fuelectenerg-1260	55	25	.	.	PUNCT
fuelectenerg-1260	56	1	mems	mem	NOUN
fuelectenerg-1260	56	2	are	be	AUX
fuelectenerg-1260	56	3	minute	minute	NOUN
fuelectenerg-1260	56	4	devices	device	NOUN
fuelectenerg-1260	56	5	that	that	PRON
fuelectenerg-1260	56	6	are	be	AUX
fuelectenerg-1260	56	7	in	in	ADP
fuelectenerg-1260	56	8	widespread	widespread	ADJ
fuelectenerg-1260	56	9	use	use	NOUN
fuelectenerg-1260	56	10	,	,	PUNCT
fuelectenerg-1260	56	11	for	for	ADP
fuelectenerg-1260	56	12	example	example	NOUN
fuelectenerg-1260	56	13	in	in	ADP
fuelectenerg-1260	56	14	airbag	airbag	NOUN
fuelectenerg-1260	56	15	triggers	trigger	NOUN
fuelectenerg-1260	56	16	and	and	CCONJ
fuelectenerg-1260	56	17	inkjet	inkjet	NOUN
fuelectenerg-1260	56	18	print	print	NOUN
fuelectenerg-1260	56	19	heads	head	NOUN
fuelectenerg-1260	56	20	,	,	PUNCT
fuelectenerg-1260	56	21	optical	optical	ADJ
fuelectenerg-1260	56	22	,	,	PUNCT
fuelectenerg-1260	56	23	medical	medical	ADJ
fuelectenerg-1260	56	24	,	,	PUNCT
fuelectenerg-1260	56	25	and	and	CCONJ
fuelectenerg-1260	56	26	many	many	ADJ
fuelectenerg-1260	56	27	other	other	ADJ
fuelectenerg-1260	56	28	applications	application	NOUN
fuelectenerg-1260	56	29	.	.	PUNCT
fuelectenerg-1260	57	1	with	with	ADP
fuelectenerg-1260	57	2	ever	ever	ADV
fuelectenerg-1260	57	3	increasing	increase	VERB
fuelectenerg-1260	57	4	new	new	ADJ
fuelectenerg-1260	57	5	applications	application	NOUN
fuelectenerg-1260	57	6	in	in	ADP
fuelectenerg-1260	57	7	the	the	DET
fuelectenerg-1260	57	8	r&d	r&d	NOUN
fuelectenerg-1260	57	9	phase	phase	NOUN
fuelectenerg-1260	57	10	,	,	PUNCT
fuelectenerg-1260	57	11	the	the	DET
fuelectenerg-1260	57	12	mems	mem	NOUN
fuelectenerg-1260	57	13	industry	industry	NOUN
fuelectenerg-1260	57	14	is	be	AUX
fuelectenerg-1260	57	15	strong	strong	ADJ
fuelectenerg-1260	57	16	and	and	CCONJ
fuelectenerg-1260	57	17	growing	grow	VERB
fuelectenerg-1260	57	18	,	,	PUNCT
fuelectenerg-1260	57	19	in	in	ADP
fuelectenerg-1260	57	20	particular	particular	ADJ
fuelectenerg-1260	57	21	in	in	ADP
fuelectenerg-1260	57	22	the	the	DET
fuelectenerg-1260	57	23	medical	medical	ADJ
fuelectenerg-1260	57	24	and	and	CCONJ
fuelectenerg-1260	57	25	optical	optical	ADJ
fuelectenerg-1260	57	26	applications	application	NOUN
fuelectenerg-1260	57	27	.	.	PUNCT
fuelectenerg-1260	58	1	by	by	ADP
fuelectenerg-1260	58	2	their	their	PRON
fuelectenerg-1260	58	3	very	very	ADJ
fuelectenerg-1260	58	4	nature	nature	NOUN
fuelectenerg-1260	58	5	,	,	PUNCT
fuelectenerg-1260	58	6	mems	mem	NOUN
fuelectenerg-1260	58	7	devices	device	NOUN
fuelectenerg-1260	58	8	are	be	AUX
fuelectenerg-1260	58	9	microscopic	microscopic	ADJ
fuelectenerg-1260	58	10	and	and	CCONJ
fuelectenerg-1260	58	11	therefore	therefore	ADV
fuelectenerg-1260	58	12	difficult	difficult	ADJ
fuelectenerg-1260	58	13	to	to	PART
fuelectenerg-1260	58	14	observe	observe	VERB
fuelectenerg-1260	58	15	in	in	ADP
fuelectenerg-1260	58	16	action	action	NOUN
fuelectenerg-1260	58	17	.	.	PUNCT
fuelectenerg-1260	59	1	in	in	ADP
fuelectenerg-1260	59	2	the	the	DET
fuelectenerg-1260	59	3	macroscopic	macroscopic	ADJ
fuelectenerg-1260	59	4	world	world	NOUN
fuelectenerg-1260	59	5	of	of	ADP
fuelectenerg-1260	59	6	our	our	PRON
fuelectenerg-1260	59	7	daily	daily	ADJ
fuelectenerg-1260	59	8	experience	experience	NOUN
fuelectenerg-1260	59	9	,	,	PUNCT
fuelectenerg-1260	59	10	inertia	inertia	NOUN
fuelectenerg-1260	59	11	and	and	CCONJ
fuelectenerg-1260	59	12	gravity	gravity	NOUN
fuelectenerg-1260	59	13	dominate	dominate	VERB
fuelectenerg-1260	59	14	the	the	DET
fuelectenerg-1260	59	15	motion	motion	NOUN
fuelectenerg-1260	59	16	of	of	ADP
fuelectenerg-1260	59	17	objects	object	NOUN
fuelectenerg-1260	59	18	.	.	PUNCT
fuelectenerg-1260	60	1	in	in	ADP
fuelectenerg-1260	60	2	contrast	contrast	NOUN
fuelectenerg-1260	60	3	,	,	PUNCT
fuelectenerg-1260	60	4	in	in	ADP
fuelectenerg-1260	60	5	the	the	DET
fuelectenerg-1260	60	6	microscopic	microscopic	ADJ
fuelectenerg-1260	60	7	domain	domain	NOUN
fuelectenerg-1260	60	8	of	of	ADP
fuelectenerg-1260	60	9	mems	mem	NOUN
fuelectenerg-1260	60	10	adhesion	adhesion	NOUN
fuelectenerg-1260	60	11	and	and	CCONJ
fuelectenerg-1260	60	12	friction	friction	NOUN
fuelectenerg-1260	60	13	are	be	AUX
fuelectenerg-1260	60	14	the	the	DET
fuelectenerg-1260	60	15	dominant	dominant	ADJ
fuelectenerg-1260	60	16	forces	force	NOUN
fuelectenerg-1260	60	17	.	.	PUNCT
fuelectenerg-1260	61	1	therefore	therefore	ADV
fuelectenerg-1260	61	2	,	,	PUNCT
fuelectenerg-1260	61	3	mems	mem	NOUN
fuelectenerg-1260	61	4	designers	designer	NOUN
fuelectenerg-1260	61	5	can	can	AUX
fuelectenerg-1260	61	6	not	not	PART
fuelectenerg-1260	61	7	use	use	VERB
fuelectenerg-1260	61	8	their	their	PRON
fuelectenerg-1260	61	9	intuition	intuition	NOUN
fuelectenerg-1260	61	10	on	on	ADP
fuelectenerg-1260	61	11	how	how	SCONJ
fuelectenerg-1260	61	12	things	thing	NOUN
fuelectenerg-1260	61	13	behave	behave	VERB
fuelectenerg-1260	61	14	.	.	PUNCT
fuelectenerg-1260	62	1	because	because	SCONJ
fuelectenerg-1260	62	2	of	of	ADP
fuelectenerg-1260	62	3	the	the	DET
fuelectenerg-1260	62	4	different	different	ADJ
fuelectenerg-1260	62	5	dominant	dominant	ADJ
fuelectenerg-1260	62	6	forces	force	NOUN
fuelectenerg-1260	62	7	,	,	PUNCT
fuelectenerg-1260	62	8	mems	mem	NOUN
fuelectenerg-1260	62	9	can	can	AUX
fuelectenerg-1260	62	10	not	not	PART
fuelectenerg-1260	62	11	simply	simply	ADV
fuelectenerg-1260	62	12	be	be	AUX
fuelectenerg-1260	62	13	downscaled	downscale	VERB
fuelectenerg-1260	62	14	counterparts	counterpart	NOUN
fuelectenerg-1260	62	15	of	of	ADP
fuelectenerg-1260	62	16	larger	large	ADJ
fuelectenerg-1260	62	17	mechanical	mechanical	ADJ
fuelectenerg-1260	62	18	machines	machine	NOUN
fuelectenerg-1260	62	19	,	,	PUNCT
fuelectenerg-1260	62	20	requiring	require	VERB
fuelectenerg-1260	62	21	innovative	innovative	ADJ
fuelectenerg-1260	62	22	designs	design	NOUN
fuelectenerg-1260	62	23	and	and	CCONJ
fuelectenerg-1260	62	24	arrangements	arrangement	NOUN
fuelectenerg-1260	62	25	of	of	ADP
fuelectenerg-1260	62	26	their	their	PRON
fuelectenerg-1260	62	27	components	component	NOUN
fuelectenerg-1260	62	28	,	,	PUNCT
fuelectenerg-1260	62	29	whose	whose	DET
fuelectenerg-1260	62	30	effects	effect	NOUN
fuelectenerg-1260	62	31	are	be	AUX
fuelectenerg-1260	62	32	often	often	ADV
fuelectenerg-1260	62	33	not	not	PART
fuelectenerg-1260	62	34	fully	fully	ADV
fuelectenerg-1260	62	35	understood	understand	VERB
fuelectenerg-1260	62	36	.	.	PUNCT
fuelectenerg-1260	63	1	for	for	ADP
fuelectenerg-1260	63	2	example	example	NOUN
fuelectenerg-1260	63	3	,	,	PUNCT
fuelectenerg-1260	63	4	a	a	DET
fuelectenerg-1260	63	5	fluid	fluid	ADJ
fuelectenerg-1260	63	6	pump	pump	NOUN
fuelectenerg-1260	63	7	with	with	ADP
fuelectenerg-1260	63	8	macroscopic	macroscopic	ADJ
fuelectenerg-1260	63	9	dimensions	dimension	NOUN
fuelectenerg-1260	63	10	would	would	AUX
fuelectenerg-1260	63	11	not	not	PART
fuelectenerg-1260	63	12	function	function	VERB
fuelectenerg-1260	63	13	if	if	SCONJ
fuelectenerg-1260	63	14	it	it	PRON
fuelectenerg-1260	63	15	were	be	AUX
fuelectenerg-1260	63	16	downscaled	downscale	VERB
fuelectenerg-1260	63	17	to	to	ADP
fuelectenerg-1260	63	18	a	a	DET
fuelectenerg-1260	63	19	miniature	miniature	ADJ
fuelectenerg-1260	63	20	version	version	NOUN
fuelectenerg-1260	63	21	with	with	ADP
fuelectenerg-1260	63	22	microscopic	microscopic	ADJ
fuelectenerg-1260	63	23	dimensions	dimension	NOUN
fuelectenerg-1260	63	24	.	.	PUNCT
fuelectenerg-1260	64	1	2.1	2.1	NUM
fuelectenerg-1260	64	2	.	.	PUNCT
fuelectenerg-1260	64	3	evolution	evolution	NOUN
fuelectenerg-1260	64	4	and	and	CCONJ
fuelectenerg-1260	64	5	rise	rise	NOUN
fuelectenerg-1260	64	6	of	of	ADP
fuelectenerg-1260	64	7	mems	mem	NOUN
fuelectenerg-1260	64	8	mems	mem	NOUN
fuelectenerg-1260	64	9	emerged	emerge	VERB
fuelectenerg-1260	64	10	in	in	ADP
fuelectenerg-1260	64	11	the	the	DET
fuelectenerg-1260	64	12	late	late	ADJ
fuelectenerg-1260	64	13	eighties	eighty	NOUN
fuelectenerg-1260	64	14	and	and	CCONJ
fuelectenerg-1260	64	15	nineties	ninety	NOUN
fuelectenerg-1260	64	16	with	with	ADP
fuelectenerg-1260	64	17	the	the	DET
fuelectenerg-1260	64	18	downscaling	downscaling	NOUN
fuelectenerg-1260	64	19	of	of	ADP
fuelectenerg-1260	64	20	transistors	transistor	NOUN
fuelectenerg-1260	64	21	’	'	PUNCT
fuelectenerg-1260	64	22	structures	structure	NOUN
fuelectenerg-1260	64	23	into	into	ADP
fuelectenerg-1260	64	24	the	the	DET
fuelectenerg-1260	64	25	submicron	submicron	NOUN
fuelectenerg-1260	64	26	scale	scale	NOUN
fuelectenerg-1260	64	27	and	and	CCONJ
fuelectenerg-1260	64	28	by	by	ADP
fuelectenerg-1260	64	29	perfectioning	perfectione	VERB
fuelectenerg-1260	64	30	microlithography	microlithography	NOUN
fuelectenerg-1260	64	31	patterning	pattern	VERB
fuelectenerg-1260	64	32	.	.	PUNCT
fuelectenerg-1260	65	1	since	since	SCONJ
fuelectenerg-1260	65	2	these	these	DET
fuelectenerg-1260	65	3	early	early	ADJ
fuelectenerg-1260	65	4	days	day	NOUN
fuelectenerg-1260	65	5	,	,	PUNCT
fuelectenerg-1260	65	6	mems	mem	NOUN
fuelectenerg-1260	65	7	sizes	size	NOUN
fuelectenerg-1260	65	8	are	be	AUX
fuelectenerg-1260	65	9	not	not	PART
fuelectenerg-1260	65	10	only	only	ADV
fuelectenerg-1260	65	11	in	in	ADP
fuelectenerg-1260	65	12	the	the	DET
fuelectenerg-1260	65	13	micron	micron	NOUN
fuelectenerg-1260	65	14	range	range	NOUN
fuelectenerg-1260	65	15	but	but	CCONJ
fuelectenerg-1260	65	16	can	can	AUX
fuelectenerg-1260	65	17	be	be	AUX
fuelectenerg-1260	65	18	several	several	ADJ
fuelectenerg-1260	65	19	millimetres	millimetre	NOUN
fuelectenerg-1260	65	20	big	big	ADJ
fuelectenerg-1260	65	21	.	.	PUNCT
fuelectenerg-1260	66	1	the	the	DET
fuelectenerg-1260	66	2	intention	intention	NOUN
fuelectenerg-1260	66	3	is	be	AUX
fuelectenerg-1260	66	4	to	to	PART
fuelectenerg-1260	66	5	keep	keep	VERB
fuelectenerg-1260	66	6	them	they	PRON
fuelectenerg-1260	66	7	as	as	ADV
fuelectenerg-1260	66	8	small	small	ADJ
fuelectenerg-1260	66	9	as	as	ADP
fuelectenerg-1260	66	10	possible	possible	ADJ
fuelectenerg-1260	66	11	.	.	PUNCT
fuelectenerg-1260	67	1	small	small	ADJ
fuelectenerg-1260	67	2	means	mean	VERB
fuelectenerg-1260	67	3	less	less	ADJ
fuelectenerg-1260	67	4	materials	material	NOUN
fuelectenerg-1260	67	5	and	and	CCONJ
fuelectenerg-1260	67	6	therefore	therefore	ADV
fuelectenerg-1260	67	7	less	less	ADV
fuelectenerg-1260	67	8	cost	cost	NOUN
fuelectenerg-1260	67	9	and	and	CCONJ
fuelectenerg-1260	67	10	more	more	ADJ
fuelectenerg-1260	67	11	flexibility	flexibility	NOUN
fuelectenerg-1260	67	12	in	in	ADP
fuelectenerg-1260	67	13	their	their	PRON
fuelectenerg-1260	67	14	placing	placing	NOUN
fuelectenerg-1260	67	15	.	.	PUNCT
fuelectenerg-1260	68	1	mems	mem	NOUN
fuelectenerg-1260	68	2	materials	material	NOUN
fuelectenerg-1260	68	3	are	be	AUX
fuelectenerg-1260	68	4	no	no	ADV
fuelectenerg-1260	68	5	longer	long	ADV
fuelectenerg-1260	68	6	limited	limit	VERB
fuelectenerg-1260	68	7	to	to	ADP
fuelectenerg-1260	68	8	silicon	silicon	NOUN
fuelectenerg-1260	68	9	but	but	CCONJ
fuelectenerg-1260	68	10	also	also	ADV
fuelectenerg-1260	68	11	other	other	ADJ
fuelectenerg-1260	68	12	materials	material	NOUN
fuelectenerg-1260	68	13	e.g.	e.g.	ADV
fuelectenerg-1260	68	14	polymers	polymer	NOUN
fuelectenerg-1260	68	15	or	or	CCONJ
fuelectenerg-1260	68	16	metal	metal	NOUN
fuelectenerg-1260	68	17	are	be	AUX
fuelectenerg-1260	68	18	used	use	VERB
fuelectenerg-1260	68	19	.	.	PUNCT
fuelectenerg-1260	69	1	mems	mem	NOUN
fuelectenerg-1260	69	2	appeared	appear	VERB
fuelectenerg-1260	69	3	as	as	ADP
fuelectenerg-1260	69	4	a	a	DET
fuelectenerg-1260	69	5	new	new	ADJ
fuelectenerg-1260	69	6	opportunity	opportunity	NOUN
fuelectenerg-1260	69	7	in	in	ADP
fuelectenerg-1260	69	8	microelectronic	microelectronic	ADJ
fuelectenerg-1260	69	9	manufacturing	manufacturing	NOUN
fuelectenerg-1260	69	10	,	,	PUNCT
fuelectenerg-1260	69	11	in	in	ADP
fuelectenerg-1260	69	12	which	which	PRON
fuelectenerg-1260	69	13	many	many	ADJ
fuelectenerg-1260	69	14	of	of	ADP
fuelectenerg-1260	69	15	the	the	DET
fuelectenerg-1260	69	16	fabrication	fabrication	NOUN
fuelectenerg-1260	69	17	steps	step	NOUN
fuelectenerg-1260	69	18	and	and	CCONJ
fuelectenerg-1260	69	19	factory	factory	NOUN
fuelectenerg-1260	69	20	facilities	facility	NOUN
fuelectenerg-1260	69	21	of	of	ADP
fuelectenerg-1260	69	22	semiconductor	semiconductor	NOUN
fuelectenerg-1260	69	23	industry	industry	NOUN
fuelectenerg-1260	69	24	could	could	AUX
fuelectenerg-1260	69	25	also	also	ADV
fuelectenerg-1260	69	26	be	be	AUX
fuelectenerg-1260	69	27	used	use	VERB
fuelectenerg-1260	69	28	for	for	ADP
fuelectenerg-1260	69	29	mems	mem	NOUN
fuelectenerg-1260	69	30	fabrication	fabrication	NOUN
fuelectenerg-1260	69	31	.	.	PUNCT
fuelectenerg-1260	70	1	liga	liga	PROPN
fuelectenerg-1260	70	2	technology	technology	NOUN
fuelectenerg-1260	70	3	,	,	PUNCT
fuelectenerg-1260	70	4	developed	develop	VERB
fuelectenerg-1260	70	5	at	at	ADP
fuelectenerg-1260	70	6	the	the	DET
fuelectenerg-1260	70	7	fzk	fzk	NOUN
fuelectenerg-1260	70	8	,	,	PUNCT
fuelectenerg-1260	70	9	germany	germany	PROPN
fuelectenerg-1260	71	1	[	[	X
fuelectenerg-1260	71	2	2	2	NUM
fuelectenerg-1260	71	3	]	]	PUNCT
fuelectenerg-1260	71	4	for	for	ADP
fuelectenerg-1260	71	5	micropatterning	micropatterne	VERB
fuelectenerg-1260	71	6	precise	precise	ADJ
fuelectenerg-1260	71	7	aspect	aspect	NOUN
fuelectenerg-1260	71	8	ratio	ratio	NOUN
fuelectenerg-1260	71	9	microstructures	microstructure	NOUN
fuelectenerg-1260	71	10	with	with	ADP
fuelectenerg-1260	71	11	steep	steep	ADJ
fuelectenerg-1260	71	12	trenches	trench	NOUN
fuelectenerg-1260	71	13	or	or	CCONJ
fuelectenerg-1260	71	14	walls	wall	NOUN
fuelectenerg-1260	71	15	,	,	PUNCT
fuelectenerg-1260	71	16	played	play	VERB
fuelectenerg-1260	71	17	an	an	DET
fuelectenerg-1260	71	18	important	important	ADJ
fuelectenerg-1260	71	19	role	role	NOUN
fuelectenerg-1260	71	20	in	in	ADP
fuelectenerg-1260	71	21	patterning	pattern	VERB
fuelectenerg-1260	71	22	microstructures	microstructure	NOUN
fuelectenerg-1260	71	23	[	[	X
fuelectenerg-1260	71	24	3	3	NUM
fuelectenerg-1260	71	25	]	]	PUNCT
fuelectenerg-1260	71	26	.	.	PUNCT
fuelectenerg-1260	72	1	examples	example	NOUN
fuelectenerg-1260	72	2	of	of	ADP
fuelectenerg-1260	72	3	achievements	achievement	NOUN
fuelectenerg-1260	72	4	and	and	CCONJ
fuelectenerg-1260	72	5	benefits	benefit	NOUN
fuelectenerg-1260	72	6	in	in	ADP
fuelectenerg-1260	72	7	aspect	aspect	NOUN
fuelectenerg-1260	72	8	ratio	ratio	NOUN
fuelectenerg-1260	72	9	precision	precision	NOUN
fuelectenerg-1260	72	10	with	with	ADP
fuelectenerg-1260	72	11	liga	liga	PROPN
fuelectenerg-1260	72	12	are	be	AUX
fuelectenerg-1260	72	13	micro	micro	ADP
fuelectenerg-1260	72	14	optical	optical	ADJ
fuelectenerg-1260	72	15	devices	device	NOUN
fuelectenerg-1260	72	16	using	use	VERB
fuelectenerg-1260	72	17	filters	filter	NOUN
fuelectenerg-1260	72	18	with	with	ADP
fuelectenerg-1260	72	19	submicron	submicron	NOUN
fuelectenerg-1260	72	20	sized	size	VERB
fuelectenerg-1260	72	21	structures	structure	NOUN
fuelectenerg-1260	72	22	,	,	PUNCT
fuelectenerg-1260	72	23	wave	wave	NOUN
fuelectenerg-1260	72	24	guides	guide	NOUN
fuelectenerg-1260	72	25	and	and	CCONJ
fuelectenerg-1260	72	26	photonic	photonic	ADJ
fuelectenerg-1260	72	27	crystals	crystal	NOUN
fuelectenerg-1260	72	28	,	,	PUNCT
fuelectenerg-1260	72	29	or	or	CCONJ
fuelectenerg-1260	72	30	gears	gear	NOUN
fuelectenerg-1260	72	31	of	of	ADP
fuelectenerg-1260	72	32	gold	gold	NOUN
fuelectenerg-1260	72	33	(	(	PUNCT
fuelectenerg-1260	72	34	luxury	luxury	NOUN
fuelectenerg-1260	72	35	watch	watch	NOUN
fuelectenerg-1260	72	36	components	component	NOUN
fuelectenerg-1260	72	37	)	)	PUNCT
fuelectenerg-1260	72	38	,	,	PUNCT
fuelectenerg-1260	72	39	that	that	PRON
fuelectenerg-1260	72	40	are	be	AUX
fuelectenerg-1260	72	41	so	so	ADV
fuelectenerg-1260	72	42	perfectly	perfectly	ADV
fuelectenerg-1260	72	43	fitting	fitting	ADJ
fuelectenerg-1260	72	44	that	that	SCONJ
fuelectenerg-1260	72	45	they	they	PRON
fuelectenerg-1260	72	46	do	do	AUX
fuelectenerg-1260	72	47	not	not	PART
fuelectenerg-1260	72	48	need	need	VERB
fuelectenerg-1260	72	49	lubrication	lubrication	NOUN
fuelectenerg-1260	72	50	[	[	X
fuelectenerg-1260	72	51	4	4	NUM
fuelectenerg-1260	72	52	]	]	PUNCT
fuelectenerg-1260	72	53	.	.	PUNCT
fuelectenerg-1260	73	1	the	the	DET
fuelectenerg-1260	73	2	use	use	NOUN
fuelectenerg-1260	73	3	of	of	ADP
fuelectenerg-1260	73	4	polymers	polymer	NOUN
fuelectenerg-1260	73	5	opened	open	VERB
fuelectenerg-1260	73	6	a	a	DET
fuelectenerg-1260	73	7	new	new	ADJ
fuelectenerg-1260	73	8	opportunity	opportunity	NOUN
fuelectenerg-1260	73	9	for	for	ADP
fuelectenerg-1260	73	10	mems	mem	NOUN
fuelectenerg-1260	73	11	.	.	PUNCT
fuelectenerg-1260	74	1	one	one	NUM
fuelectenerg-1260	74	2	often	often	ADV
fuelectenerg-1260	74	3	speaks	speak	VERB
fuelectenerg-1260	74	4	of	of	ADP
fuelectenerg-1260	74	5	mems	mem	NOUN
fuelectenerg-1260	74	6	as	as	ADP
fuelectenerg-1260	74	7	complex	complex	ADJ
fuelectenerg-1260	74	8	devices	device	NOUN
fuelectenerg-1260	74	9	.	.	PUNCT
fuelectenerg-1260	75	1	however	however	ADV
fuelectenerg-1260	75	2	,	,	PUNCT
fuelectenerg-1260	75	3	the	the	DET
fuelectenerg-1260	75	4	structural	structural	ADJ
fuelectenerg-1260	75	5	complexity	complexity	NOUN
fuelectenerg-1260	75	6	and	and	CCONJ
fuelectenerg-1260	75	7	the	the	DET
fuelectenerg-1260	75	8	functional	functional	ADJ
fuelectenerg-1260	75	9	complexity	complexity	NOUN
fuelectenerg-1260	75	10	of	of	ADP
fuelectenerg-1260	75	11	mems	mem	NOUN
fuelectenerg-1260	75	12	[	[	X
fuelectenerg-1260	75	13	5	5	NUM
fuelectenerg-1260	75	14	]	]	PUNCT
fuelectenerg-1260	75	15	can	can	AUX
fuelectenerg-1260	75	16	be	be	AUX
fuelectenerg-1260	75	17	very	very	ADV
fuelectenerg-1260	75	18	different	different	ADJ
fuelectenerg-1260	75	19	.	.	PUNCT
fuelectenerg-1260	76	1	they	they	PRON
fuelectenerg-1260	76	2	can	can	AUX
fuelectenerg-1260	76	3	be	be	AUX
fuelectenerg-1260	76	4	made	make	VERB
fuelectenerg-1260	76	5	of	of	ADP
fuelectenerg-1260	76	6	a	a	DET
fuelectenerg-1260	76	7	few	few	ADJ
fuelectenerg-1260	76	8	simple	simple	ADJ
fuelectenerg-1260	76	9	components	component	NOUN
fuelectenerg-1260	76	10	that	that	PRON
fuelectenerg-1260	76	11	produce	produce	VERB
fuelectenerg-1260	76	12	sophisticated	sophisticated	ADJ
fuelectenerg-1260	76	13	function	function	NOUN
fuelectenerg-1260	76	14	(	(	PUNCT
fuelectenerg-1260	76	15	example	example	NOUN
fuelectenerg-1260	76	16	:	:	PUNCT
fuelectenerg-1260	76	17	a	a	DET
fuelectenerg-1260	76	18	movable	movable	ADJ
fuelectenerg-1260	76	19	mirror	mirror	NOUN
fuelectenerg-1260	76	20	in	in	ADP
fuelectenerg-1260	76	21	an	an	DET
fuelectenerg-1260	76	22	optical	optical	ADJ
fuelectenerg-1260	76	23	switch	switch	NOUN
fuelectenerg-1260	76	24	)	)	PUNCT
fuelectenerg-1260	76	25	,	,	PUNCT
fuelectenerg-1260	76	26	or	or	CCONJ
fuelectenerg-1260	76	27	several	several	ADJ
fuelectenerg-1260	76	28	components	component	NOUN
fuelectenerg-1260	76	29	in	in	ADP
fuelectenerg-1260	76	30	a	a	DET
fuelectenerg-1260	76	31	complex	complex	ADJ
fuelectenerg-1260	76	32	arrangement	arrangement	NOUN
fuelectenerg-1260	76	33	that	that	PRON
fuelectenerg-1260	76	34	do	do	VERB
fuelectenerg-1260	76	35	simple	simple	ADJ
fuelectenerg-1260	76	36	function	function	NOUN
fuelectenerg-1260	76	37	(	(	PUNCT
fuelectenerg-1260	76	38	example	example	NOUN
fuelectenerg-1260	76	39	:	:	PUNCT
fuelectenerg-1260	76	40	a	a	DET
fuelectenerg-1260	76	41	microfuidic	microfuidic	ADJ
fuelectenerg-1260	76	42	pump	pump	NOUN
fuelectenerg-1260	76	43	)	)	PUNCT
fuelectenerg-1260	76	44	.	.	PUNCT
fuelectenerg-1260	77	1	by	by	ADP
fuelectenerg-1260	77	2	their	their	PRON
fuelectenerg-1260	77	3	small	small	ADJ
fuelectenerg-1260	77	4	size	size	NOUN
fuelectenerg-1260	77	5	and	and	CCONJ
fuelectenerg-1260	77	6	electronic	electronic	ADJ
fuelectenerg-1260	77	7	controllability	controllability	NOUN
fuelectenerg-1260	77	8	,	,	PUNCT
fuelectenerg-1260	77	9	mems	mem	NOUN
fuelectenerg-1260	77	10	can	can	AUX
fuelectenerg-1260	77	11	be	be	AUX
fuelectenerg-1260	77	12	built	build	VERB
fuelectenerg-1260	77	13	14	14	NUM
fuelectenerg-1260	77	14	r.	r.	PROPN
fuelectenerg-1260	77	15	sitte	sitte	PROPN
fuelectenerg-1260	77	16	into	into	ADP
fuelectenerg-1260	77	17	larger	large	ADJ
fuelectenerg-1260	77	18	devices	device	NOUN
fuelectenerg-1260	77	19	,	,	PUNCT
fuelectenerg-1260	77	20	often	often	ADV
fuelectenerg-1260	77	21	replacing	replace	VERB
fuelectenerg-1260	77	22	hitherto	hitherto	NOUN
fuelectenerg-1260	77	23	large	large	ADJ
fuelectenerg-1260	77	24	,	,	PUNCT
fuelectenerg-1260	77	25	heavy	heavy	ADJ
fuelectenerg-1260	77	26	equipment	equipment	NOUN
fuelectenerg-1260	77	27	(	(	PUNCT
fuelectenerg-1260	77	28	e.g.	e.g.	ADV
fuelectenerg-1260	77	29	gyroscopes	gyroscope	NOUN
fuelectenerg-1260	77	30	)	)	PUNCT
fuelectenerg-1260	77	31	or	or	CCONJ
fuelectenerg-1260	77	32	saving	save	VERB
fuelectenerg-1260	77	33	time	time	NOUN
fuelectenerg-1260	77	34	and	and	CCONJ
fuelectenerg-1260	77	35	laboratory	laboratory	NOUN
fuelectenerg-1260	77	36	space	space	NOUN
fuelectenerg-1260	77	37	in	in	ADP
fuelectenerg-1260	77	38	chemical	chemical	ADJ
fuelectenerg-1260	77	39	analysis	analysis	NOUN
fuelectenerg-1260	77	40	(	(	PUNCT
fuelectenerg-1260	77	41	e.g.	e.g.	ADV
fuelectenerg-1260	77	42	lab	lab	NOUN
fuelectenerg-1260	77	43	on	on	ADP
fuelectenerg-1260	77	44	a	a	DET
fuelectenerg-1260	77	45	chip	chip	NOUN
fuelectenerg-1260	77	46	)	)	PUNCT
fuelectenerg-1260	77	47	.	.	PUNCT
fuelectenerg-1260	78	1	2.2	2.2	NUM
fuelectenerg-1260	78	2	.	.	PUNCT
fuelectenerg-1260	78	3	impact	impact	NOUN
fuelectenerg-1260	78	4	in	in	ADP
fuelectenerg-1260	78	5	medicine	medicine	NOUN
fuelectenerg-1260	78	6	an	an	DET
fuelectenerg-1260	78	7	increasingly	increasingly	ADV
fuelectenerg-1260	78	8	important	important	ADJ
fuelectenerg-1260	78	9	impact	impact	NOUN
fuelectenerg-1260	78	10	of	of	ADP
fuelectenerg-1260	78	11	mems	mem	NOUN
fuelectenerg-1260	78	12	is	be	AUX
fuelectenerg-1260	78	13	in	in	ADP
fuelectenerg-1260	78	14	the	the	DET
fuelectenerg-1260	78	15	medical	medical	ADJ
fuelectenerg-1260	78	16	industry	industry	NOUN
fuelectenerg-1260	78	17	where	where	SCONJ
fuelectenerg-1260	78	18	it	it	PRON
fuelectenerg-1260	78	19	has	have	AUX
fuelectenerg-1260	78	20	changed	change	VERB
fuelectenerg-1260	78	21	medical	medical	ADJ
fuelectenerg-1260	78	22	diagnostics	diagnostic	NOUN
fuelectenerg-1260	78	23	and	and	CCONJ
fuelectenerg-1260	78	24	surgery	surgery	NOUN
fuelectenerg-1260	78	25	in	in	ADP
fuelectenerg-1260	78	26	an	an	DET
fuelectenerg-1260	78	27	evolution	evolution	NOUN
fuelectenerg-1260	78	28	from	from	ADP
fuelectenerg-1260	78	29	microgrippers	microgripper	NOUN
fuelectenerg-1260	78	30	to	to	PART
fuelectenerg-1260	78	31	endoscopy	endoscopy	VERB
fuelectenerg-1260	78	32	and	and	CCONJ
fuelectenerg-1260	78	33	robotic	robotic	ADJ
fuelectenerg-1260	78	34	surgery	surgery	NOUN
fuelectenerg-1260	78	35	.	.	PUNCT
fuelectenerg-1260	79	1	this	this	PRON
fuelectenerg-1260	79	2	in	in	ADP
fuelectenerg-1260	79	3	turn	turn	NOUN
fuelectenerg-1260	79	4	has	have	AUX
fuelectenerg-1260	79	5	transformed	transform	VERB
fuelectenerg-1260	79	6	and	and	CCONJ
fuelectenerg-1260	79	7	brought	bring	VERB
fuelectenerg-1260	79	8	in	in	ADP
fuelectenerg-1260	79	9	new	new	ADJ
fuelectenerg-1260	79	10	capabilities	capability	NOUN
fuelectenerg-1260	79	11	e.g.	e.g.	ADV
fuelectenerg-1260	79	12	ultrasonic	ultrasonic	ADJ
fuelectenerg-1260	79	13	surgery	surgery	NOUN
fuelectenerg-1260	79	14	,	,	PUNCT
fuelectenerg-1260	79	15	microsurgery	microsurgery	NOUN
fuelectenerg-1260	79	16	e.g.	e.g.	ADV
fuelectenerg-1260	79	17	in	in	ADP
fuelectenerg-1260	79	18	eyes	eye	NOUN
fuelectenerg-1260	79	19	,	,	PUNCT
fuelectenerg-1260	79	20	on	on	ADP
fuelectenerg-1260	79	21	embryos	embryo	NOUN
fuelectenerg-1260	79	22	,	,	PUNCT
fuelectenerg-1260	79	23	tactile	tactile	ADJ
fuelectenerg-1260	79	24	feedback	feedback	NOUN
fuelectenerg-1260	79	25	and	and	CCONJ
fuelectenerg-1260	79	26	with	with	ADP
fuelectenerg-1260	79	27	it	it	PRON
fuelectenerg-1260	79	28	keyhole	keyhole	NOUN
fuelectenerg-1260	79	29	surgery	surgery	NOUN
fuelectenerg-1260	79	30	with	with	ADP
fuelectenerg-1260	79	31	all	all	DET
fuelectenerg-1260	79	32	its	its	PRON
fuelectenerg-1260	79	33	associated	associated	ADJ
fuelectenerg-1260	79	34	benefits	benefit	NOUN
fuelectenerg-1260	79	35	[	[	X
fuelectenerg-1260	79	36	6	6	NUM
fuelectenerg-1260	79	37	]	]	PUNCT
fuelectenerg-1260	79	38	.	.	PUNCT
fuelectenerg-1260	80	1	mems	mems	PROPN
fuelectenerg-1260	80	2	’	'	PUNCT
fuelectenerg-1260	80	3	share	share	NOUN
fuelectenerg-1260	80	4	in	in	ADP
fuelectenerg-1260	80	5	the	the	DET
fuelectenerg-1260	80	6	medical	medical	ADJ
fuelectenerg-1260	80	7	industry	industry	NOUN
fuelectenerg-1260	80	8	alone	alone	ADV
fuelectenerg-1260	80	9	has	have	AUX
fuelectenerg-1260	80	10	grown	grow	VERB
fuelectenerg-1260	80	11	into	into	ADP
fuelectenerg-1260	80	12	a	a	DET
fuelectenerg-1260	80	13	multi	multi	ADJ
fuelectenerg-1260	80	14	billion	billion	NUM
fuelectenerg-1260	80	15	dollar	dollar	NOUN
fuelectenerg-1260	80	16	industry	industry	NOUN
fuelectenerg-1260	80	17	in	in	ADP
fuelectenerg-1260	80	18	less	less	ADJ
fuelectenerg-1260	80	19	than	than	ADP
fuelectenerg-1260	80	20	twenty	twenty	NUM
fuelectenerg-1260	80	21	years	year	NOUN
fuelectenerg-1260	80	22	.	.	PUNCT
fuelectenerg-1260	81	1	another	another	DET
fuelectenerg-1260	81	2	successful	successful	ADJ
fuelectenerg-1260	81	3	niche	niche	NOUN
fuelectenerg-1260	81	4	for	for	ADP
fuelectenerg-1260	81	5	mems	mem	NOUN
fuelectenerg-1260	81	6	with	with	ADP
fuelectenerg-1260	81	7	remarkable	remarkable	ADJ
fuelectenerg-1260	81	8	advances	advance	NOUN
fuelectenerg-1260	81	9	are	be	AUX
fuelectenerg-1260	81	10	in	in	ADP
fuelectenerg-1260	81	11	biophysical	biophysical	ADJ
fuelectenerg-1260	81	12	applications	application	NOUN
fuelectenerg-1260	81	13	.	.	PUNCT
fuelectenerg-1260	82	1	for	for	ADP
fuelectenerg-1260	82	2	example	example	NOUN
fuelectenerg-1260	82	3	,	,	PUNCT
fuelectenerg-1260	82	4	margesin	margesin	PROPN
fuelectenerg-1260	82	5	et	et	PROPN
fuelectenerg-1260	82	6	al	al	PROPN
fuelectenerg-1260	82	7	.	.	PROPN
fuelectenerg-1260	82	8	designed	design	VERB
fuelectenerg-1260	82	9	a	a	DET
fuelectenerg-1260	82	10	mems	mem	NOUN
fuelectenerg-1260	82	11	for	for	ADP
fuelectenerg-1260	82	12	measuring	measure	VERB
fuelectenerg-1260	82	13	the	the	DET
fuelectenerg-1260	82	14	electrical	electrical	ADJ
fuelectenerg-1260	82	15	activity	activity	NOUN
fuelectenerg-1260	82	16	and	and	CCONJ
fuelectenerg-1260	82	17	metabolic	metabolic	NOUN
fuelectenerg-1260	82	18	activity	activity	NOUN
fuelectenerg-1260	82	19	(	(	PUNCT
fuelectenerg-1260	82	20	ion	ion	NOUN
fuelectenerg-1260	82	21	concentration	concentration	NOUN
fuelectenerg-1260	82	22	)	)	PUNCT
fuelectenerg-1260	82	23	in	in	ADP
fuelectenerg-1260	82	24	a	a	DET
fuelectenerg-1260	82	25	network	network	NOUN
fuelectenerg-1260	82	26	of	of	ADP
fuelectenerg-1260	82	27	neurons	neuron	NOUN
fuelectenerg-1260	82	28	using	use	VERB
fuelectenerg-1260	82	29	ionsensitive	ionsensitive	ADJ
fuelectenerg-1260	82	30	field	field	NOUN
fuelectenerg-1260	82	31	-	-	PUNCT
fuelectenerg-1260	82	32	effect	effect	NOUN
fuelectenerg-1260	82	33	transistor	transistor	NOUN
fuelectenerg-1260	82	34	(	(	PUNCT
fuelectenerg-1260	82	35	isfet	isfet	NOUN
fuelectenerg-1260	82	36	)	)	PUNCT
fuelectenerg-1260	82	37	arrays	array	VERB
fuelectenerg-1260	83	1	[	[	X
fuelectenerg-1260	83	2	7	7	NUM
fuelectenerg-1260	83	3	]	]	PUNCT
fuelectenerg-1260	83	4	.	.	PUNCT
fuelectenerg-1260	84	1	a	a	DET
fuelectenerg-1260	84	2	word	word	NOUN
fuelectenerg-1260	84	3	of	of	ADP
fuelectenerg-1260	84	4	caution	caution	NOUN
fuelectenerg-1260	84	5	,	,	PUNCT
fuelectenerg-1260	84	6	microsystems	microsystem	NOUN
fuelectenerg-1260	84	7	and	and	CCONJ
fuelectenerg-1260	84	8	nanotechnology	nanotechnology	NOUN
fuelectenerg-1260	84	9	are	be	AUX
fuelectenerg-1260	84	10	often	often	ADV
fuelectenerg-1260	84	11	erroneously	erroneously	ADV
fuelectenerg-1260	84	12	thought	think	VERB
fuelectenerg-1260	84	13	as	as	ADP
fuelectenerg-1260	84	14	being	be	AUX
fuelectenerg-1260	84	15	the	the	DET
fuelectenerg-1260	84	16	same	same	ADJ
fuelectenerg-1260	84	17	.	.	PUNCT
fuelectenerg-1260	85	1	they	they	PRON
fuelectenerg-1260	85	2	are	be	AUX
fuelectenerg-1260	85	3	not	not	PART
fuelectenerg-1260	85	4	;	;	PUNCT
fuelectenerg-1260	85	5	they	they	PRON
fuelectenerg-1260	85	6	operate	operate	VERB
fuelectenerg-1260	85	7	at	at	ADP
fuelectenerg-1260	85	8	different	different	ADJ
fuelectenerg-1260	85	9	scales	scale	NOUN
fuelectenerg-1260	85	10	of	of	ADP
fuelectenerg-1260	85	11	resolution	resolution	NOUN
fuelectenerg-1260	85	12	.	.	PUNCT
fuelectenerg-1260	86	1	nanotechnology	nanotechnology	NOUN
fuelectenerg-1260	86	2	deals	deal	VERB
fuelectenerg-1260	86	3	at	at	ADP
fuelectenerg-1260	86	4	molecular	molecular	ADJ
fuelectenerg-1260	86	5	and	and	CCONJ
fuelectenerg-1260	86	6	particle	particle	NOUN
fuelectenerg-1260	86	7	level	level	NOUN
fuelectenerg-1260	86	8	and	and	CCONJ
fuelectenerg-1260	86	9	therefore	therefore	ADV
fuelectenerg-1260	86	10	uses	use	VERB
fuelectenerg-1260	86	11	different	different	ADJ
fuelectenerg-1260	86	12	models	model	NOUN
fuelectenerg-1260	86	13	;	;	PUNCT
fuelectenerg-1260	86	14	it	it	PRON
fuelectenerg-1260	86	15	has	have	VERB
fuelectenerg-1260	86	16	different	different	ADJ
fuelectenerg-1260	86	17	challenges	challenge	NOUN
fuelectenerg-1260	86	18	and	and	CCONJ
fuelectenerg-1260	86	19	different	different	ADJ
fuelectenerg-1260	86	20	industrial	industrial	ADJ
fuelectenerg-1260	86	21	potential	potential	NOUN
fuelectenerg-1260	86	22	.	.	PUNCT
fuelectenerg-1260	87	1	however	however	ADV
fuelectenerg-1260	87	2	,	,	PUNCT
fuelectenerg-1260	87	3	in	in	ADP
fuelectenerg-1260	87	4	microtechnology	microtechnology	NOUN
fuelectenerg-1260	87	5	it	it	PRON
fuelectenerg-1260	87	6	is	be	AUX
fuelectenerg-1260	87	7	possible	possible	ADJ
fuelectenerg-1260	87	8	to	to	PART
fuelectenerg-1260	87	9	produce	produce	VERB
fuelectenerg-1260	87	10	nano	nano	NOUN
fuelectenerg-1260	87	11	-	-	PUNCT
fuelectenerg-1260	87	12	sized	sized	ADJ
fuelectenerg-1260	87	13	structures	structure	NOUN
fuelectenerg-1260	87	14	whenever	whenever	SCONJ
fuelectenerg-1260	87	15	necessary	necessary	ADJ
fuelectenerg-1260	87	16	.	.	PUNCT
fuelectenerg-1260	88	1	rieth	rieth	PROPN
fuelectenerg-1260	88	2	has	have	AUX
fuelectenerg-1260	88	3	written	write	VERB
fuelectenerg-1260	88	4	a	a	DET
fuelectenerg-1260	88	5	good	good	ADJ
fuelectenerg-1260	88	6	introduction	introduction	NOUN
fuelectenerg-1260	88	7	in	in	ADP
fuelectenerg-1260	88	8	a	a	DET
fuelectenerg-1260	88	9	nutshell	nutshell	NOUN
fuelectenerg-1260	88	10	about	about	ADP
fuelectenerg-1260	88	11	nanotechnology	nanotechnology	NOUN
fuelectenerg-1260	88	12	(	(	PUNCT
fuelectenerg-1260	88	13	suitable	suitable	ADJ
fuelectenerg-1260	88	14	for	for	ADP
fuelectenerg-1260	88	15	advanced	advanced	ADJ
fuelectenerg-1260	88	16	readers	reader	NOUN
fuelectenerg-1260	88	17	)	)	PUNCT
fuelectenerg-1260	89	1	[	[	X
fuelectenerg-1260	89	2	8	8	NUM
fuelectenerg-1260	89	3	]	]	PUNCT
fuelectenerg-1260	89	4	.	.	PUNCT
fuelectenerg-1260	90	1	2.3	2.3	NUM
fuelectenerg-1260	90	2	.	.	PUNCT
fuelectenerg-1260	90	3	training	training	NOUN
fuelectenerg-1260	90	4	and	and	CCONJ
fuelectenerg-1260	90	5	specialization	specialization	NOUN
fuelectenerg-1260	90	6	when	when	SCONJ
fuelectenerg-1260	90	7	it	it	PRON
fuelectenerg-1260	90	8	comes	come	VERB
fuelectenerg-1260	90	9	to	to	ADP
fuelectenerg-1260	90	10	education	education	NOUN
fuelectenerg-1260	90	11	,	,	PUNCT
fuelectenerg-1260	90	12	vr	vr	PROPN
fuelectenerg-1260	90	13	is	be	AUX
fuelectenerg-1260	90	14	nowadays	nowadays	ADV
fuelectenerg-1260	90	15	a	a	DET
fuelectenerg-1260	90	16	well	well	ADV
fuelectenerg-1260	90	17	established	establish	VERB
fuelectenerg-1260	90	18	option	option	NOUN
fuelectenerg-1260	90	19	in	in	ADP
fuelectenerg-1260	90	20	undergraduate	undergraduate	ADJ
fuelectenerg-1260	90	21	multimedia	multimedia	NOUN
fuelectenerg-1260	90	22	curricula	curricula	NOUN
fuelectenerg-1260	90	23	in	in	ADP
fuelectenerg-1260	90	24	many	many	ADJ
fuelectenerg-1260	90	25	tertiary	tertiary	ADJ
fuelectenerg-1260	90	26	institutions	institution	NOUN
fuelectenerg-1260	90	27	,	,	PUNCT
fuelectenerg-1260	90	28	with	with	SCONJ
fuelectenerg-1260	90	29	some	some	DET
fuelectenerg-1260	90	30	institutes	institute	NOUN
fuelectenerg-1260	90	31	more	more	ADV
fuelectenerg-1260	90	32	specialized	specialized	ADJ
fuelectenerg-1260	90	33	in	in	ADP
fuelectenerg-1260	90	34	vr	vr	NOUN
fuelectenerg-1260	90	35	than	than	ADP
fuelectenerg-1260	90	36	others	other	NOUN
fuelectenerg-1260	90	37	.	.	PUNCT
fuelectenerg-1260	91	1	in	in	ADP
fuelectenerg-1260	91	2	contrast	contrast	NOUN
fuelectenerg-1260	91	3	,	,	PUNCT
fuelectenerg-1260	91	4	the	the	DET
fuelectenerg-1260	91	5	teaching	teaching	NOUN
fuelectenerg-1260	91	6	of	of	ADP
fuelectenerg-1260	91	7	microsystems	microsystem	NOUN
fuelectenerg-1260	91	8	is	be	AUX
fuelectenerg-1260	91	9	usually	usually	ADV
fuelectenerg-1260	91	10	deferred	defer	VERB
fuelectenerg-1260	91	11	to	to	ADP
fuelectenerg-1260	91	12	at	at	ADP
fuelectenerg-1260	91	13	least	least	ADJ
fuelectenerg-1260	91	14	masters	master	NOUN
fuelectenerg-1260	91	15	level	level	NOUN
fuelectenerg-1260	91	16	.	.	PUNCT
fuelectenerg-1260	92	1	this	this	PRON
fuelectenerg-1260	92	2	is	be	AUX
fuelectenerg-1260	92	3	due	due	ADJ
fuelectenerg-1260	92	4	to	to	ADP
fuelectenerg-1260	92	5	the	the	DET
fuelectenerg-1260	92	6	multidisciplinarity	multidisciplinarity	NOUN
fuelectenerg-1260	92	7	required	require	VERB
fuelectenerg-1260	92	8	in	in	ADP
fuelectenerg-1260	92	9	understanding	understand	VERB
fuelectenerg-1260	92	10	mems	mem	NOUN
fuelectenerg-1260	92	11	.	.	PUNCT
fuelectenerg-1260	93	1	institutes	institute	NOUN
fuelectenerg-1260	93	2	that	that	PRON
fuelectenerg-1260	93	3	are	be	AUX
fuelectenerg-1260	93	4	known	know	VERB
fuelectenerg-1260	93	5	by	by	ADP
fuelectenerg-1260	93	6	their	their	PRON
fuelectenerg-1260	93	7	excellence	excellence	NOUN
fuelectenerg-1260	93	8	in	in	ADP
fuelectenerg-1260	93	9	the	the	DET
fuelectenerg-1260	93	10	field	field	NOUN
fuelectenerg-1260	93	11	also	also	ADV
fuelectenerg-1260	93	12	offer	offer	VERB
fuelectenerg-1260	93	13	regularly	regularly	ADV
fuelectenerg-1260	93	14	specific	specific	ADJ
fuelectenerg-1260	93	15	specialization	specialization	NOUN
fuelectenerg-1260	93	16	short	short	ADJ
fuelectenerg-1260	93	17	courses	course	NOUN
fuelectenerg-1260	93	18	.	.	PUNCT
fuelectenerg-1260	94	1	such	such	ADJ
fuelectenerg-1260	94	2	short	short	ADJ
fuelectenerg-1260	94	3	courses	course	NOUN
fuelectenerg-1260	94	4	and	and	CCONJ
fuelectenerg-1260	94	5	summer	summer	NOUN
fuelectenerg-1260	94	6	schools	school	NOUN
fuelectenerg-1260	94	7	provide	provide	VERB
fuelectenerg-1260	94	8	an	an	DET
fuelectenerg-1260	94	9	introduction	introduction	NOUN
fuelectenerg-1260	94	10	to	to	ADP
fuelectenerg-1260	94	11	a	a	DET
fuelectenerg-1260	94	12	specific	specific	ADJ
fuelectenerg-1260	94	13	topic	topic	NOUN
fuelectenerg-1260	94	14	;	;	PUNCT
fuelectenerg-1260	94	15	they	they	PRON
fuelectenerg-1260	94	16	are	be	AUX
fuelectenerg-1260	94	17	a	a	DET
fuelectenerg-1260	94	18	valuable	valuable	ADJ
fuelectenerg-1260	94	19	step	step	NOUN
fuelectenerg-1260	94	20	towards	towards	ADP
fuelectenerg-1260	94	21	postgraduate	postgraduate	ADJ
fuelectenerg-1260	94	22	research	research	NOUN
fuelectenerg-1260	94	23	.	.	PUNCT
fuelectenerg-1260	95	1	programs	program	NOUN
fuelectenerg-1260	95	2	for	for	ADP
fuelectenerg-1260	95	3	short	short	ADJ
fuelectenerg-1260	95	4	courses	course	NOUN
fuelectenerg-1260	95	5	can	can	AUX
fuelectenerg-1260	95	6	be	be	AUX
fuelectenerg-1260	95	7	easily	easily	ADV
fuelectenerg-1260	95	8	found	find	VERB
fuelectenerg-1260	95	9	through	through	ADP
fuelectenerg-1260	95	10	international	international	ADJ
fuelectenerg-1260	95	11	professional	professional	ADJ
fuelectenerg-1260	95	12	organizations	organization	NOUN
fuelectenerg-1260	95	13	.	.	PUNCT
fuelectenerg-1260	96	1	examples	example	NOUN
fuelectenerg-1260	96	2	are	be	AUX
fuelectenerg-1260	96	3	fsrm	fsrm	PROPN
fuelectenerg-1260	96	4	fondation	fondation	PROPN
fuelectenerg-1260	96	5	suisse	suisse	PROPN
fuelectenerg-1260	96	6	pour	pour	X
fuelectenerg-1260	96	7	la	la	X
fuelectenerg-1260	96	8	recherche	recherche	X
fuelectenerg-1260	96	9	en	en	X
fuelectenerg-1260	96	10	microtechnique	microtechnique	PROPN
fuelectenerg-1260	96	11	(	(	PUNCT
fuelectenerg-1260	96	12	swiss	swiss	ADJ
fuelectenerg-1260	96	13	foundation	foundation	NOUN
fuelectenerg-1260	96	14	for	for	ADP
fuelectenerg-1260	96	15	research	research	NOUN
fuelectenerg-1260	96	16	in	in	ADP
fuelectenerg-1260	96	17	microtechnology	microtechnology	NOUN
fuelectenerg-1260	96	18	)	)	PUNCT
fuelectenerg-1260	96	19	,	,	PUNCT
fuelectenerg-1260	96	20	neuchatel	neuchatel	NOUN
fuelectenerg-1260	97	1	[	[	X
fuelectenerg-1260	97	2	9	9	NUM
fuelectenerg-1260	97	3	]	]	PUNCT
fuelectenerg-1260	97	4	,	,	PUNCT
fuelectenerg-1260	97	5	imec	imec	ADP
fuelectenerg-1260	97	6	interuniversity	interuniversity	NOUN
fuelectenerg-1260	97	7	microelectronics	microelectronic	NOUN
fuelectenerg-1260	97	8	centre	centre	NOUN
fuelectenerg-1260	97	9	,	,	PUNCT
fuelectenerg-1260	97	10	leuven	leuven	NOUN
fuelectenerg-1260	98	1	[	[	X
fuelectenerg-1260	98	2	10	10	NUM
fuelectenerg-1260	98	3	]	]	PUNCT
fuelectenerg-1260	98	4	or	or	CCONJ
fuelectenerg-1260	98	5	the	the	DET
fuelectenerg-1260	98	6	ieee	ieee	NOUN
fuelectenerg-1260	98	7	[	[	X
fuelectenerg-1260	98	8	11	11	NUM
fuelectenerg-1260	98	9	]	]	PUNCT
fuelectenerg-1260	98	10	and	and	CCONJ
fuelectenerg-1260	98	11	eurotraining	eurotraine	VERB
fuelectenerg-1260	98	12	[	[	X
fuelectenerg-1260	98	13	12	12	NUM
fuelectenerg-1260	98	14	]	]	PUNCT
fuelectenerg-1260	98	15	.	.	PUNCT
fuelectenerg-1260	99	1	while	while	SCONJ
fuelectenerg-1260	99	2	a	a	DET
fuelectenerg-1260	99	3	researcher	researcher	NOUN
fuelectenerg-1260	99	4	or	or	CCONJ
fuelectenerg-1260	99	5	student	student	NOUN
fuelectenerg-1260	99	6	should	should	AUX
fuelectenerg-1260	99	7	stick	stick	VERB
fuelectenerg-1260	99	8	to	to	PART
fuelectenerg-1260	99	9	reputable	reputable	ADJ
fuelectenerg-1260	99	10	and	and	CCONJ
fuelectenerg-1260	99	11	peer	peer	NOUN
fuelectenerg-1260	99	12	reviewed	review	VERB
fuelectenerg-1260	99	13	literature	literature	NOUN
fuelectenerg-1260	99	14	,	,	PUNCT
fuelectenerg-1260	99	15	one	one	PRON
fuelectenerg-1260	99	16	must	must	AUX
fuelectenerg-1260	99	17	never	never	ADV
fuelectenerg-1260	99	18	forget	forget	VERB
fuelectenerg-1260	99	19	that	that	SCONJ
fuelectenerg-1260	99	20	in	in	ADP
fuelectenerg-1260	99	21	industry	industry	NOUN
fuelectenerg-1260	99	22	is	be	AUX
fuelectenerg-1260	99	23	where	where	SCONJ
fuelectenerg-1260	99	24	results	result	NOUN
fuelectenerg-1260	99	25	of	of	ADP
fuelectenerg-1260	99	26	research	research	NOUN
fuelectenerg-1260	99	27	come	come	VERB
fuelectenerg-1260	99	28	to	to	ADP
fuelectenerg-1260	99	29	fruition	fruition	NOUN
fuelectenerg-1260	99	30	.	.	PUNCT
fuelectenerg-1260	100	1	there	there	PRON
fuelectenerg-1260	100	2	is	be	VERB
fuelectenerg-1260	100	3	a	a	DET
fuelectenerg-1260	100	4	wealth	wealth	NOUN
fuelectenerg-1260	100	5	of	of	ADP
fuelectenerg-1260	100	6	real	real	ADJ
fuelectenerg-1260	100	7	life	life	NOUN
fuelectenerg-1260	100	8	information	information	NOUN
fuelectenerg-1260	100	9	in	in	ADP
fuelectenerg-1260	100	10	industry	industry	NOUN
fuelectenerg-1260	100	11	reports	report	VERB
fuelectenerg-1260	100	12	that	that	SCONJ
fuelectenerg-1260	100	13	they	they	PRON
fuelectenerg-1260	100	14	should	should	AUX
fuelectenerg-1260	100	15	take	take	VERB
fuelectenerg-1260	100	16	advantage	advantage	NOUN
fuelectenerg-1260	100	17	of	of	ADP
fuelectenerg-1260	100	18	,	,	PUNCT
fuelectenerg-1260	100	19	albeit	albeit	SCONJ
fuelectenerg-1260	100	20	,	,	PUNCT
fuelectenerg-1260	100	21	with	with	ADP
fuelectenerg-1260	100	22	some	some	DET
fuelectenerg-1260	100	23	caution	caution	NOUN
fuelectenerg-1260	100	24	.	.	PUNCT
fuelectenerg-1260	101	1	they	they	PRON
fuelectenerg-1260	101	2	complement	complement	VERB
fuelectenerg-1260	101	3	research	research	NOUN
fuelectenerg-1260	101	4	findings	finding	NOUN
fuelectenerg-1260	101	5	by	by	ADP
fuelectenerg-1260	101	6	providing	provide	VERB
fuelectenerg-1260	101	7	eye	eye	NOUN
fuelectenerg-1260	101	8	opening	opening	NOUN
fuelectenerg-1260	101	9	context	context	NOUN
fuelectenerg-1260	101	10	.	.	PUNCT
fuelectenerg-1260	102	1	2.4	2.4	NUM
fuelectenerg-1260	102	2	.	.	PUNCT
fuelectenerg-1260	103	1	mems	mem	NOUN
fuelectenerg-1260	103	2	design	design	NOUN
fuelectenerg-1260	103	3	here	here	ADV
fuelectenerg-1260	103	4	we	we	PRON
fuelectenerg-1260	103	5	present	present	VERB
fuelectenerg-1260	103	6	a	a	DET
fuelectenerg-1260	103	7	selection	selection	NOUN
fuelectenerg-1260	103	8	of	of	ADP
fuelectenerg-1260	103	9	issues	issue	NOUN
fuelectenerg-1260	103	10	arising	arise	VERB
fuelectenerg-1260	103	11	in	in	ADP
fuelectenerg-1260	103	12	mems	mems	ADJ
fuelectenerg-1260	103	13	design	design	NOUN
fuelectenerg-1260	103	14	,	,	PUNCT
fuelectenerg-1260	103	15	with	with	ADP
fuelectenerg-1260	103	16	the	the	DET
fuelectenerg-1260	103	17	intention	intention	NOUN
fuelectenerg-1260	103	18	of	of	ADP
fuelectenerg-1260	103	19	preparing	prepare	VERB
fuelectenerg-1260	103	20	the	the	DET
fuelectenerg-1260	103	21	scene	scene	NOUN
fuelectenerg-1260	103	22	towards	towards	ADP
fuelectenerg-1260	103	23	virtual	virtual	ADJ
fuelectenerg-1260	103	24	prototyping	prototyping	NOUN
fuelectenerg-1260	103	25	.	.	PUNCT
fuelectenerg-1260	104	1	mems	mem	NOUN
fuelectenerg-1260	104	2	design	design	NOUN
fuelectenerg-1260	104	3	can	can	AUX
fuelectenerg-1260	104	4	be	be	AUX
fuelectenerg-1260	104	5	overwhelming	overwhelming	ADJ
fuelectenerg-1260	104	6	by	by	ADP
fuelectenerg-1260	104	7	the	the	DET
fuelectenerg-1260	104	8	wide	wide	ADJ
fuelectenerg-1260	104	9	,	,	PUNCT
fuelectenerg-1260	104	10	almost	almost	ADV
fuelectenerg-1260	104	11	infinite	infinite	ADJ
fuelectenerg-1260	104	12	range	range	NOUN
fuelectenerg-1260	104	13	of	of	ADP
fuelectenerg-1260	104	14	possible	possible	ADJ
fuelectenerg-1260	104	15	structures	structure	NOUN
fuelectenerg-1260	104	16	and	and	CCONJ
fuelectenerg-1260	104	17	how	how	SCONJ
fuelectenerg-1260	104	18	these	these	DET
fuelectenerg-1260	104	19	structures	structure	NOUN
fuelectenerg-1260	104	20	work	work	VERB
fuelectenerg-1260	104	21	together	together	ADV
fuelectenerg-1260	104	22	to	to	PART
fuelectenerg-1260	104	23	provide	provide	VERB
fuelectenerg-1260	104	24	a	a	DET
fuelectenerg-1260	104	25	useful	useful	ADJ
fuelectenerg-1260	104	26	function	function	NOUN
fuelectenerg-1260	104	27	.	.	PUNCT
fuelectenerg-1260	105	1	mastromatteo	mastromatteo	PROPN
fuelectenerg-1260	105	2	and	and	CCONJ
fuelectenerg-1260	105	3	murari	murari	PROPN
fuelectenerg-1260	105	4	have	have	AUX
fuelectenerg-1260	105	5	designed	design	VERB
fuelectenerg-1260	105	6	and	and	CCONJ
fuelectenerg-1260	105	7	proposed	propose	VERB
fuelectenerg-1260	105	8	an	an	DET
fuelectenerg-1260	105	9	architecture	architecture	NOUN
fuelectenerg-1260	105	10	to	to	PART
fuelectenerg-1260	105	11	address	address	VERB
fuelectenerg-1260	105	12	the	the	DET
fuelectenerg-1260	105	13	diversity	diversity	NOUN
fuelectenerg-1260	105	14	of	of	ADP
fuelectenerg-1260	105	15	mems	mem	NOUN
fuelectenerg-1260	105	16	by	by	ADP
fuelectenerg-1260	105	17	grouping	group	VERB
fuelectenerg-1260	105	18	them	they	PRON
fuelectenerg-1260	105	19	into	into	ADP
fuelectenerg-1260	105	20	the	the	DET
fuelectenerg-1260	105	21	traditional	traditional	ADJ
fuelectenerg-1260	105	22	categories	category	NOUN
fuelectenerg-1260	105	23	moems	moem	NOUN
fuelectenerg-1260	105	24	,	,	PUNCT
fuelectenerg-1260	105	25	mems	mem	NOUN
fuelectenerg-1260	105	26	,	,	PUNCT
fuelectenerg-1260	105	27	lab	lab	NOUN
fuelectenerg-1260	105	28	on	on	ADP
fuelectenerg-1260	105	29	chip	chip	NOUN
fuelectenerg-1260	105	30	,	,	PUNCT
fuelectenerg-1260	105	31	rf	rf	NOUN
fuelectenerg-1260	105	32	mems	mem	NOUN
fuelectenerg-1260	105	33	,	,	PUNCT
fuelectenerg-1260	105	34	data	datum	NOUN
fuelectenerg-1260	105	35	storage	storage	NOUN
fuelectenerg-1260	105	36	mems	mem	NOUN
fuelectenerg-1260	105	37	.	.	PUNCT
fuelectenerg-1260	106	1	mems	mem	NOUN
fuelectenerg-1260	106	2	design	design	NOUN
fuelectenerg-1260	106	3	simplification	simplification	NOUN
fuelectenerg-1260	106	4	with	with	ADP
fuelectenerg-1260	106	5	virtual	virtual	ADJ
fuelectenerg-1260	106	6	prototyping	prototyping	NOUN
fuelectenerg-1260	106	7	15	15	NUM
fuelectenerg-1260	106	8	however	however	ADV
fuelectenerg-1260	106	9	,	,	PUNCT
fuelectenerg-1260	106	10	it	it	PRON
fuelectenerg-1260	106	11	is	be	AUX
fuelectenerg-1260	106	12	not	not	PART
fuelectenerg-1260	106	13	always	always	ADV
fuelectenerg-1260	106	14	possible	possible	ADJ
fuelectenerg-1260	106	15	to	to	PART
fuelectenerg-1260	106	16	allocate	allocate	VERB
fuelectenerg-1260	106	17	a	a	DET
fuelectenerg-1260	106	18	mems	mem	NOUN
fuelectenerg-1260	106	19	into	into	ADP
fuelectenerg-1260	106	20	just	just	ADV
fuelectenerg-1260	106	21	one	one	NUM
fuelectenerg-1260	106	22	of	of	ADP
fuelectenerg-1260	106	23	any	any	PRON
fuelectenerg-1260	106	24	these	these	DET
fuelectenerg-1260	106	25	categories	category	NOUN
fuelectenerg-1260	106	26	in	in	ADP
fuelectenerg-1260	106	27	a	a	DET
fuelectenerg-1260	106	28	very	very	ADV
fuelectenerg-1260	106	29	strict	strict	ADJ
fuelectenerg-1260	106	30	sense	sense	NOUN
fuelectenerg-1260	106	31	due	due	ADP
fuelectenerg-1260	106	32	to	to	ADP
fuelectenerg-1260	106	33	their	their	PRON
fuelectenerg-1260	106	34	cross	cross	NOUN
fuelectenerg-1260	106	35	category	category	NOUN
fuelectenerg-1260	106	36	functionality	functionality	NOUN
fuelectenerg-1260	106	37	[	[	X
fuelectenerg-1260	106	38	13	13	NUM
fuelectenerg-1260	106	39	]	]	PUNCT
fuelectenerg-1260	106	40	.	.	PUNCT
fuelectenerg-1260	107	1	grouping	group	VERB
fuelectenerg-1260	107	2	them	they	PRON
fuelectenerg-1260	107	3	helps	help	VERB
fuelectenerg-1260	107	4	to	to	PART
fuelectenerg-1260	107	5	conceptualize	conceptualize	VERB
fuelectenerg-1260	107	6	,	,	PUNCT
fuelectenerg-1260	107	7	but	but	CCONJ
fuelectenerg-1260	107	8	it	it	PRON
fuelectenerg-1260	107	9	is	be	AUX
fuelectenerg-1260	107	10	not	not	PART
fuelectenerg-1260	107	11	a	a	DET
fuelectenerg-1260	107	12	strict	strict	ADJ
fuelectenerg-1260	107	13	definition	definition	NOUN
fuelectenerg-1260	107	14	or	or	CCONJ
fuelectenerg-1260	107	15	standard	standard	NOUN
fuelectenerg-1260	107	16	.	.	PUNCT
fuelectenerg-1260	108	1	spearing	spearing	NOUN
fuelectenerg-1260	108	2	analyzes	analyze	NOUN
fuelectenerg-1260	108	3	scaling	scale	VERB
fuelectenerg-1260	108	4	the	the	DET
fuelectenerg-1260	108	5	size	size	NOUN
fuelectenerg-1260	108	6	of	of	ADP
fuelectenerg-1260	108	7	mems	mem	NOUN
fuelectenerg-1260	108	8	in	in	ADP
fuelectenerg-1260	108	9	the	the	DET
fuelectenerg-1260	108	10	context	context	NOUN
fuelectenerg-1260	108	11	of	of	ADP
fuelectenerg-1260	108	12	macro	macro	X
fuelectenerg-1260	108	13	versus	versus	X
fuelectenerg-1260	108	14	micro	micro	ADJ
fuelectenerg-1260	108	15	scaling	scaling	NOUN
fuelectenerg-1260	108	16	.	.	PUNCT
fuelectenerg-1260	109	1	in	in	ADP
fuelectenerg-1260	109	2	his	his	PRON
fuelectenerg-1260	109	3	work	work	NOUN
fuelectenerg-1260	109	4	the	the	DET
fuelectenerg-1260	109	5	relation	relation	NOUN
fuelectenerg-1260	109	6	between	between	ADP
fuelectenerg-1260	109	7	mass	mass	NOUN
fuelectenerg-1260	109	8	–	–	PUNCT
fuelectenerg-1260	109	9	volume	volume	NOUN
fuelectenerg-1260	109	10	scaling	scaling	NOUN
fuelectenerg-1260	109	11	and	and	CCONJ
fuelectenerg-1260	109	12	volumetric	volumetric	NOUN
fuelectenerg-1260	109	13	to	to	PART
fuelectenerg-1260	109	14	area	area	NOUN
fuelectenerg-1260	109	15	scaling	scale	VERB
fuelectenerg-1260	109	16	are	be	AUX
fuelectenerg-1260	109	17	explained	explain	VERB
fuelectenerg-1260	109	18	.	.	PUNCT
fuelectenerg-1260	110	1	this	this	PRON
fuelectenerg-1260	110	2	is	be	AUX
fuelectenerg-1260	110	3	summarized	summarize	VERB
fuelectenerg-1260	110	4	in	in	ADP
fuelectenerg-1260	110	5	a	a	DET
fuelectenerg-1260	110	6	table	table	NOUN
fuelectenerg-1260	110	7	for	for	ADP
fuelectenerg-1260	110	8	guidance	guidance	NOUN
fuelectenerg-1260	110	9	for	for	ADP
fuelectenerg-1260	110	10	possible	possible	ADJ
fuelectenerg-1260	110	11	scaling	scaling	NOUN
fuelectenerg-1260	110	12	in	in	ADP
fuelectenerg-1260	110	13	mems	mem	NOUN
fuelectenerg-1260	110	14	design	design	NOUN
fuelectenerg-1260	110	15	.	.	PUNCT
fuelectenerg-1260	111	1	the	the	DET
fuelectenerg-1260	111	2	work	work	NOUN
fuelectenerg-1260	111	3	shows	show	VERB
fuelectenerg-1260	111	4	how	how	SCONJ
fuelectenerg-1260	111	5	some	some	PRON
fuelectenerg-1260	111	6	of	of	ADP
fuelectenerg-1260	111	7	the	the	DET
fuelectenerg-1260	111	8	most	most	ADV
fuelectenerg-1260	111	9	important	important	ADJ
fuelectenerg-1260	111	10	effects	effect	NOUN
fuelectenerg-1260	111	11	of	of	ADP
fuelectenerg-1260	111	12	scale	scale	NOUN
fuelectenerg-1260	111	13	on	on	ADP
fuelectenerg-1260	111	14	mems	mem	NOUN
fuelectenerg-1260	111	15	design	design	NOUN
fuelectenerg-1260	111	16	or	or	CCONJ
fuelectenerg-1260	111	17	performance	performance	NOUN
fuelectenerg-1260	111	18	can	can	AUX
fuelectenerg-1260	111	19	not	not	PART
fuelectenerg-1260	111	20	be	be	AUX
fuelectenerg-1260	111	21	attributed	attribute	VERB
fuelectenerg-1260	111	22	to	to	ADP
fuelectenerg-1260	111	23	a	a	DET
fuelectenerg-1260	111	24	single	single	ADJ
fuelectenerg-1260	111	25	physical	physical	ADJ
fuelectenerg-1260	111	26	factor	factor	NOUN
fuelectenerg-1260	111	27	.	.	PUNCT
fuelectenerg-1260	112	1	it	it	PRON
fuelectenerg-1260	112	2	also	also	ADV
fuelectenerg-1260	112	3	shows	show	VERB
fuelectenerg-1260	112	4	the	the	DET
fuelectenerg-1260	112	5	need	need	NOUN
fuelectenerg-1260	112	6	for	for	ADP
fuelectenerg-1260	112	7	fabrication	fabrication	NOUN
fuelectenerg-1260	112	8	processes	process	NOUN
fuelectenerg-1260	112	9	that	that	PRON
fuelectenerg-1260	112	10	allow	allow	VERB
fuelectenerg-1260	112	11	for	for	ADP
fuelectenerg-1260	112	12	dimensional	dimensional	ADJ
fuelectenerg-1260	112	13	tolerance	tolerance	NOUN
fuelectenerg-1260	112	14	but	but	CCONJ
fuelectenerg-1260	112	15	that	that	SCONJ
fuelectenerg-1260	112	16	this	this	PRON
fuelectenerg-1260	112	17	can	can	AUX
fuelectenerg-1260	112	18	be	be	AUX
fuelectenerg-1260	112	19	limiting	limit	VERB
fuelectenerg-1260	112	20	to	to	ADP
fuelectenerg-1260	112	21	the	the	DET
fuelectenerg-1260	112	22	shapes	shape	NOUN
fuelectenerg-1260	112	23	achieved	achieve	VERB
fuelectenerg-1260	112	24	.	.	PUNCT
fuelectenerg-1260	113	1	as	as	ADP
fuelectenerg-1260	113	2	a	a	DET
fuelectenerg-1260	113	3	consequence	consequence	NOUN
fuelectenerg-1260	113	4	in	in	ADP
fuelectenerg-1260	113	5	mems	mem	NOUN
fuelectenerg-1260	113	6	distinct	distinct	ADJ
fuelectenerg-1260	113	7	,	,	PUNCT
fuelectenerg-1260	113	8	more	more	ADV
fuelectenerg-1260	113	9	expensive	expensive	ADJ
fuelectenerg-1260	113	10	materials	material	NOUN
fuelectenerg-1260	113	11	may	may	AUX
fuelectenerg-1260	113	12	be	be	AUX
fuelectenerg-1260	113	13	used	use	VERB
fuelectenerg-1260	113	14	,	,	PUNCT
fuelectenerg-1260	113	15	whose	whose	DET
fuelectenerg-1260	113	16	cost	cost	NOUN
fuelectenerg-1260	113	17	would	would	AUX
fuelectenerg-1260	113	18	be	be	AUX
fuelectenerg-1260	113	19	prohibitive	prohibitive	ADJ
fuelectenerg-1260	113	20	for	for	ADP
fuelectenerg-1260	113	21	larger	large	ADJ
fuelectenerg-1260	113	22	sized	sized	ADJ
fuelectenerg-1260	113	23	devices	device	NOUN
fuelectenerg-1260	114	1	[	[	X
fuelectenerg-1260	114	2	14	14	NUM
fuelectenerg-1260	114	3	]	]	PUNCT
fuelectenerg-1260	114	4	.	.	PUNCT
fuelectenerg-1260	115	1	materials	material	NOUN
fuelectenerg-1260	115	2	play	play	VERB
fuelectenerg-1260	115	3	an	an	DET
fuelectenerg-1260	115	4	important	important	ADJ
fuelectenerg-1260	115	5	role	role	NOUN
fuelectenerg-1260	115	6	,	,	PUNCT
fuelectenerg-1260	115	7	in	in	ADP
fuelectenerg-1260	115	8	for	for	ADP
fuelectenerg-1260	115	9	example	example	NOUN
fuelectenerg-1260	115	10	flexing	flex	VERB
fuelectenerg-1260	115	11	membranes	membrane	NOUN
fuelectenerg-1260	115	12	in	in	ADP
fuelectenerg-1260	115	13	micropumps	micropump	NOUN
fuelectenerg-1260	115	14	,	,	PUNCT
fuelectenerg-1260	115	15	or	or	CCONJ
fuelectenerg-1260	115	16	cantilever	cantilever	NOUN
fuelectenerg-1260	115	17	switches	switch	NOUN
fuelectenerg-1260	115	18	.	.	PUNCT
fuelectenerg-1260	116	1	senturia	senturia	PROPN
fuelectenerg-1260	116	2	offers	offer	VERB
fuelectenerg-1260	116	3	an	an	DET
fuelectenerg-1260	116	4	introductory	introductory	ADJ
fuelectenerg-1260	116	5	overview	overview	NOUN
fuelectenerg-1260	116	6	into	into	ADP
fuelectenerg-1260	116	7	this	this	DET
fuelectenerg-1260	116	8	area	area	NOUN
fuelectenerg-1260	116	9	structures	structure	NOUN
fuelectenerg-1260	116	10	,	,	PUNCT
fuelectenerg-1260	116	11	processes	process	NOUN
fuelectenerg-1260	116	12	and	and	CCONJ
fuelectenerg-1260	116	13	modelling	model	VERB
fuelectenerg-1260	116	14	[	[	X
fuelectenerg-1260	116	15	15	15	NUM
fuelectenerg-1260	116	16	]	]	PUNCT
fuelectenerg-1260	116	17	.	.	PUNCT
fuelectenerg-1260	117	1	another	another	DET
fuelectenerg-1260	117	2	good	good	ADJ
fuelectenerg-1260	117	3	source	source	NOUN
fuelectenerg-1260	117	4	is	be	AUX
fuelectenerg-1260	117	5	by	by	ADP
fuelectenerg-1260	117	6	pelesko	pelesko	ADV
fuelectenerg-1260	117	7	and	and	CCONJ
fuelectenerg-1260	117	8	bernstein	bernstein	PROPN
fuelectenerg-1260	117	9	explaining	explain	VERB
fuelectenerg-1260	117	10	structures	structure	NOUN
fuelectenerg-1260	117	11	and	and	CCONJ
fuelectenerg-1260	117	12	device	device	NOUN
fuelectenerg-1260	117	13	behaviours	behaviour	NOUN
fuelectenerg-1260	117	14	by	by	ADP
fuelectenerg-1260	117	15	motivating	motivate	VERB
fuelectenerg-1260	117	16	and	and	CCONJ
fuelectenerg-1260	117	17	developing	develop	VERB
fuelectenerg-1260	117	18	understanding	understanding	NOUN
fuelectenerg-1260	117	19	and	and	CCONJ
fuelectenerg-1260	117	20	intuition	intuition	NOUN
fuelectenerg-1260	117	21	and	and	CCONJ
fuelectenerg-1260	117	22	then	then	ADV
fuelectenerg-1260	117	23	moving	move	VERB
fuelectenerg-1260	117	24	into	into	ADP
fuelectenerg-1260	117	25	the	the	DET
fuelectenerg-1260	117	26	modelling	modelling	NOUN
fuelectenerg-1260	117	27	and	and	CCONJ
fuelectenerg-1260	117	28	optimization	optimization	NOUN
fuelectenerg-1260	117	29	[	[	X
fuelectenerg-1260	117	30	16	16	NUM
fuelectenerg-1260	117	31	]	]	PUNCT
fuelectenerg-1260	117	32	.	.	PUNCT
fuelectenerg-1260	118	1	2.5	2.5	NUM
fuelectenerg-1260	118	2	.	.	PUNCT
fuelectenerg-1260	119	1	mems	mem	NOUN
fuelectenerg-1260	119	2	evolving	evolve	VERB
fuelectenerg-1260	119	3	manufacturing	manufacture	VERB
fuelectenerg-1260	119	4	alternatives	alternative	NOUN
fuelectenerg-1260	119	5	mems	mem	NOUN
fuelectenerg-1260	119	6	are	be	AUX
fuelectenerg-1260	119	7	3d	3d	NUM
fuelectenerg-1260	119	8	devices	device	NOUN
fuelectenerg-1260	119	9	.	.	PUNCT
fuelectenerg-1260	120	1	the	the	DET
fuelectenerg-1260	120	2	traditional	traditional	ADJ
fuelectenerg-1260	120	3	functional	functional	ADJ
fuelectenerg-1260	120	4	distinction	distinction	NOUN
fuelectenerg-1260	120	5	is	be	AUX
fuelectenerg-1260	120	6	into	into	ADP
fuelectenerg-1260	120	7	sensors	sensor	NOUN
fuelectenerg-1260	120	8	and	and	CCONJ
fuelectenerg-1260	120	9	actuators	actuator	NOUN
fuelectenerg-1260	120	10	[	[	X
fuelectenerg-1260	120	11	17	17	NUM
fuelectenerg-1260	120	12	]	]	PUNCT
fuelectenerg-1260	120	13	.	.	PUNCT
fuelectenerg-1260	121	1	they	they	PRON
fuelectenerg-1260	121	2	can	can	AUX
fuelectenerg-1260	121	3	be	be	AUX
fuelectenerg-1260	121	4	one	one	NUM
fuelectenerg-1260	121	5	single	single	ADJ
fuelectenerg-1260	121	6	structure	structure	NOUN
fuelectenerg-1260	121	7	,	,	PUNCT
fuelectenerg-1260	121	8	or	or	CCONJ
fuelectenerg-1260	121	9	the	the	DET
fuelectenerg-1260	121	10	result	result	NOUN
fuelectenerg-1260	121	11	of	of	ADP
fuelectenerg-1260	121	12	many	many	ADJ
fuelectenerg-1260	121	13	components	component	NOUN
fuelectenerg-1260	121	14	but	but	CCONJ
fuelectenerg-1260	121	15	they	they	PRON
fuelectenerg-1260	121	16	all	all	PRON
fuelectenerg-1260	121	17	need	need	VERB
fuelectenerg-1260	121	18	some	some	DET
fuelectenerg-1260	121	19	circuitry	circuitry	NOUN
fuelectenerg-1260	121	20	or	or	CCONJ
fuelectenerg-1260	121	21	interaction	interaction	NOUN
fuelectenerg-1260	121	22	to	to	PART
fuelectenerg-1260	121	23	control	control	VERB
fuelectenerg-1260	121	24	them	they	PRON
fuelectenerg-1260	121	25	.	.	PUNCT
fuelectenerg-1260	122	1	in	in	ADP
fuelectenerg-1260	122	2	silicon	silicon	NOUN
fuelectenerg-1260	122	3	manufacturing	manufacturing	NOUN
fuelectenerg-1260	122	4	,	,	PUNCT
fuelectenerg-1260	122	5	it	it	PRON
fuelectenerg-1260	122	6	would	would	AUX
fuelectenerg-1260	122	7	save	save	VERB
fuelectenerg-1260	122	8	huge	huge	ADJ
fuelectenerg-1260	122	9	fabrication	fabrication	NOUN
fuelectenerg-1260	122	10	costs	cost	NOUN
fuelectenerg-1260	122	11	if	if	SCONJ
fuelectenerg-1260	122	12	mems	mem	NOUN
fuelectenerg-1260	122	13	and	and	CCONJ
fuelectenerg-1260	122	14	the	the	DET
fuelectenerg-1260	122	15	circuitry	circuitry	NOUN
fuelectenerg-1260	122	16	to	to	PART
fuelectenerg-1260	122	17	control	control	VERB
fuelectenerg-1260	122	18	them	they	PRON
fuelectenerg-1260	122	19	could	could	AUX
fuelectenerg-1260	122	20	be	be	AUX
fuelectenerg-1260	122	21	manufactured	manufacture	VERB
fuelectenerg-1260	122	22	together	together	ADV
fuelectenerg-1260	122	23	on	on	ADP
fuelectenerg-1260	122	24	the	the	DET
fuelectenerg-1260	122	25	same	same	ADJ
fuelectenerg-1260	122	26	wafer	wafer	NOUN
fuelectenerg-1260	122	27	.	.	PUNCT
fuelectenerg-1260	123	1	unfortunately	unfortunately	ADV
fuelectenerg-1260	123	2	,	,	PUNCT
fuelectenerg-1260	123	3	this	this	PRON
fuelectenerg-1260	123	4	is	be	AUX
fuelectenerg-1260	123	5	rarely	rarely	ADV
fuelectenerg-1260	123	6	possible	possible	ADJ
fuelectenerg-1260	123	7	because	because	SCONJ
fuelectenerg-1260	123	8	processing	processing	NOUN
fuelectenerg-1260	123	9	steps	step	NOUN
fuelectenerg-1260	123	10	that	that	PRON
fuelectenerg-1260	123	11	involve	involve	VERB
fuelectenerg-1260	123	12	heat	heat	NOUN
fuelectenerg-1260	123	13	can	can	AUX
fuelectenerg-1260	123	14	damage	damage	VERB
fuelectenerg-1260	123	15	previously	previously	ADV
fuelectenerg-1260	123	16	accomplished	accomplish	VERB
fuelectenerg-1260	123	17	structures	structure	NOUN
fuelectenerg-1260	123	18	.	.	PUNCT
fuelectenerg-1260	124	1	depending	depend	VERB
fuelectenerg-1260	124	2	on	on	ADP
fuelectenerg-1260	124	3	the	the	DET
fuelectenerg-1260	124	4	materials	material	NOUN
fuelectenerg-1260	124	5	used	use	VERB
fuelectenerg-1260	124	6	,	,	PUNCT
fuelectenerg-1260	124	7	the	the	DET
fuelectenerg-1260	124	8	structures	structure	NOUN
fuelectenerg-1260	124	9	of	of	ADP
fuelectenerg-1260	124	10	mems	mem	NOUN
fuelectenerg-1260	124	11	components	component	NOUN
fuelectenerg-1260	124	12	are	be	AUX
fuelectenerg-1260	124	13	either	either	ADV
fuelectenerg-1260	124	14	removed	remove	VERB
fuelectenerg-1260	124	15	from	from	ADP
fuelectenerg-1260	124	16	a	a	DET
fuelectenerg-1260	124	17	solid	solid	ADJ
fuelectenerg-1260	124	18	material	material	NOUN
fuelectenerg-1260	124	19	,	,	PUNCT
fuelectenerg-1260	124	20	or	or	CCONJ
fuelectenerg-1260	124	21	built	build	VERB
fuelectenerg-1260	124	22	up	up	ADP
fuelectenerg-1260	124	23	in	in	ADP
fuelectenerg-1260	124	24	a	a	DET
fuelectenerg-1260	124	25	deposition	deposition	NOUN
fuelectenerg-1260	124	26	process	process	NOUN
fuelectenerg-1260	124	27	.	.	PUNCT
fuelectenerg-1260	125	1	this	this	PRON
fuelectenerg-1260	125	2	is	be	AUX
fuelectenerg-1260	125	3	the	the	DET
fuelectenerg-1260	125	4	area	area	NOUN
fuelectenerg-1260	125	5	of	of	ADP
fuelectenerg-1260	125	6	microlithography	microlithography	NOUN
fuelectenerg-1260	125	7	and	and	CCONJ
fuelectenerg-1260	125	8	micromachining	micromachine	VERB
fuelectenerg-1260	125	9	[	[	X
fuelectenerg-1260	125	10	18	18	NUM
fuelectenerg-1260	125	11	]	]	PUNCT
fuelectenerg-1260	125	12	and	and	CCONJ
fuelectenerg-1260	125	13	[	[	X
fuelectenerg-1260	125	14	19	19	NUM
fuelectenerg-1260	125	15	]	]	PUNCT
fuelectenerg-1260	125	16	.	.	PUNCT
fuelectenerg-1260	126	1	there	there	PRON
fuelectenerg-1260	126	2	is	be	VERB
fuelectenerg-1260	126	3	a	a	DET
fuelectenerg-1260	126	4	good	good	ADJ
fuelectenerg-1260	126	5	range	range	NOUN
fuelectenerg-1260	126	6	of	of	ADP
fuelectenerg-1260	126	7	introductory	introductory	ADJ
fuelectenerg-1260	126	8	and	and	CCONJ
fuelectenerg-1260	126	9	advanced	advanced	ADJ
fuelectenerg-1260	126	10	literature	literature	NOUN
fuelectenerg-1260	126	11	available	available	ADJ
fuelectenerg-1260	126	12	,	,	PUNCT
fuelectenerg-1260	126	13	but	but	CCONJ
fuelectenerg-1260	126	14	publications	publication	NOUN
fuelectenerg-1260	126	15	hardly	hardly	ADV
fuelectenerg-1260	126	16	keep	keep	VERB
fuelectenerg-1260	126	17	up	up	ADP
fuelectenerg-1260	126	18	with	with	ADP
fuelectenerg-1260	126	19	mems	mem	NOUN
fuelectenerg-1260	126	20	’	'	PUNCT
fuelectenerg-1260	126	21	fast	fast	ADJ
fuelectenerg-1260	126	22	technology	technology	NOUN
fuelectenerg-1260	126	23	advances	advance	NOUN
fuelectenerg-1260	126	24	.	.	PUNCT
fuelectenerg-1260	127	1	one	one	NUM
fuelectenerg-1260	127	2	reason	reason	NOUN
fuelectenerg-1260	127	3	for	for	ADP
fuelectenerg-1260	127	4	publication	publication	NOUN
fuelectenerg-1260	127	5	delay	delay	NOUN
fuelectenerg-1260	127	6	is	be	AUX
fuelectenerg-1260	127	7	industrial	industrial	ADJ
fuelectenerg-1260	127	8	non	non	ADJ
fuelectenerg-1260	127	9	-	-	NOUN
fuelectenerg-1260	127	10	disclosure	disclosure	NOUN
fuelectenerg-1260	127	11	.	.	PUNCT
fuelectenerg-1260	128	1	an	an	DET
fuelectenerg-1260	128	2	overview	overview	NOUN
fuelectenerg-1260	128	3	about	about	ADP
fuelectenerg-1260	128	4	the	the	DET
fuelectenerg-1260	128	5	fabrication	fabrication	NOUN
fuelectenerg-1260	128	6	process	process	NOUN
fuelectenerg-1260	128	7	,	,	PUNCT
fuelectenerg-1260	128	8	materials	material	NOUN
fuelectenerg-1260	128	9	,	,	PUNCT
fuelectenerg-1260	128	10	processes	process	NOUN
fuelectenerg-1260	128	11	and	and	CCONJ
fuelectenerg-1260	128	12	micromachining	micromachine	VERB
fuelectenerg-1260	128	13	are	be	AUX
fuelectenerg-1260	128	14	presented	present	VERB
fuelectenerg-1260	128	15	by	by	ADP
fuelectenerg-1260	128	16	g.	g.	PROPN
fuelectenerg-1260	128	17	fedder	fedder	PROPN
fuelectenerg-1260	129	1	[	[	X
fuelectenerg-1260	129	2	20	20	NUM
fuelectenerg-1260	129	3	]	]	PUNCT
fuelectenerg-1260	129	4	and	and	CCONJ
fuelectenerg-1260	129	5	subramanian	subramanian	PROPN
fuelectenerg-1260	129	6	et	et	PROPN
fuelectenerg-1260	129	7	al	al	PROPN
fuelectenerg-1260	129	8	.	.	PUNCT
fuelectenerg-1260	130	1	[	[	X
fuelectenerg-1260	130	2	21	21	NUM
fuelectenerg-1260	130	3	]	]	PUNCT
fuelectenerg-1260	130	4	about	about	ADP
fuelectenerg-1260	130	5	design	design	NOUN
fuelectenerg-1260	130	6	.	.	PUNCT
fuelectenerg-1260	131	1	despite	despite	SCONJ
fuelectenerg-1260	131	2	mature	mature	ADJ
fuelectenerg-1260	131	3	fabrication	fabrication	NOUN
fuelectenerg-1260	131	4	processes	process	NOUN
fuelectenerg-1260	131	5	,	,	PUNCT
fuelectenerg-1260	131	6	new	new	ADJ
fuelectenerg-1260	131	7	mems	mem	NOUN
fuelectenerg-1260	131	8	applications	application	NOUN
fuelectenerg-1260	131	9	and	and	CCONJ
fuelectenerg-1260	131	10	innovations	innovation	NOUN
fuelectenerg-1260	131	11	in	in	ADP
fuelectenerg-1260	131	12	their	their	PRON
fuelectenerg-1260	131	13	fabrication	fabrication	NOUN
fuelectenerg-1260	131	14	present	present	NOUN
fuelectenerg-1260	131	15	constantly	constantly	ADV
fuelectenerg-1260	131	16	new	new	ADJ
fuelectenerg-1260	131	17	hurdles	hurdle	NOUN
fuelectenerg-1260	131	18	that	that	PRON
fuelectenerg-1260	131	19	must	must	AUX
fuelectenerg-1260	131	20	be	be	AUX
fuelectenerg-1260	131	21	overcome	overcome	VERB
fuelectenerg-1260	131	22	.	.	PUNCT
fuelectenerg-1260	132	1	this	this	PRON
fuelectenerg-1260	132	2	is	be	AUX
fuelectenerg-1260	132	3	illustrated	illustrate	VERB
fuelectenerg-1260	132	4	by	by	ADP
fuelectenerg-1260	132	5	the	the	DET
fuelectenerg-1260	132	6	design	design	NOUN
fuelectenerg-1260	132	7	and	and	CCONJ
fuelectenerg-1260	132	8	realization	realization	NOUN
fuelectenerg-1260	132	9	difficulties	difficulty	NOUN
fuelectenerg-1260	132	10	of	of	ADP
fuelectenerg-1260	132	11	a	a	DET
fuelectenerg-1260	132	12	micromachined	micromachined	ADJ
fuelectenerg-1260	132	13	silicon	silicon	NOUN
fuelectenerg-1260	132	14	nanopositioner	nanopositioner	ADV
fuelectenerg-1260	132	15	with	with	ADP
fuelectenerg-1260	132	16	electrothermal	electrothermal	ADJ
fuelectenerg-1260	132	17	positioning	positioning	NOUN
fuelectenerg-1260	132	18	by	by	ADP
fuelectenerg-1260	132	19	zhu	zhu	PROPN
fuelectenerg-1260	132	20	et	et	PROPN
fuelectenerg-1260	132	21	al	al	PROPN
fuelectenerg-1260	132	22	.	.	PUNCT
fuelectenerg-1260	133	1	[	[	X
fuelectenerg-1260	133	2	22	22	NUM
fuelectenerg-1260	133	3	]	]	PUNCT
fuelectenerg-1260	133	4	.	.	PUNCT
fuelectenerg-1260	134	1	another	another	DET
fuelectenerg-1260	134	2	example	example	NOUN
fuelectenerg-1260	134	3	is	be	AUX
fuelectenerg-1260	134	4	nanochannel	nanochannel	ADJ
fuelectenerg-1260	134	5	fabrication	fabrication	NOUN
fuelectenerg-1260	134	6	using	use	VERB
fuelectenerg-1260	134	7	bond	bond	NOUN
fuelectenerg-1260	134	8	micromachining	micromachine	VERB
fuelectenerg-1260	134	9	by	by	ADP
fuelectenerg-1260	134	10	j.	j.	PROPN
fuelectenerg-1260	134	11	haneveld	haneveld	PROPN
fuelectenerg-1260	134	12	[	[	X
fuelectenerg-1260	134	13	23	23	NUM
fuelectenerg-1260	134	14	]	]	PUNCT
fuelectenerg-1260	134	15	.	.	PUNCT
fuelectenerg-1260	135	1	normally	normally	ADV
fuelectenerg-1260	135	2	,	,	PUNCT
fuelectenerg-1260	135	3	the	the	DET
fuelectenerg-1260	135	4	fabrication	fabrication	NOUN
fuelectenerg-1260	135	5	of	of	ADP
fuelectenerg-1260	135	6	mems	mem	NOUN
fuelectenerg-1260	135	7	is	be	AUX
fuelectenerg-1260	135	8	not	not	PART
fuelectenerg-1260	135	9	a	a	DET
fuelectenerg-1260	135	10	simple	simple	ADJ
fuelectenerg-1260	135	11	process	process	NOUN
fuelectenerg-1260	135	12	.	.	PUNCT
fuelectenerg-1260	136	1	if	if	SCONJ
fuelectenerg-1260	136	2	it	it	PRON
fuelectenerg-1260	136	3	is	be	AUX
fuelectenerg-1260	136	4	in	in	ADP
fuelectenerg-1260	136	5	traditional	traditional	ADJ
fuelectenerg-1260	136	6	silicon	silicon	NOUN
fuelectenerg-1260	136	7	technology	technology	NOUN
fuelectenerg-1260	136	8	,	,	PUNCT
fuelectenerg-1260	136	9	it	it	PRON
fuelectenerg-1260	136	10	requires	require	VERB
fuelectenerg-1260	136	11	a	a	DET
fuelectenerg-1260	136	12	semiconductor	semiconductor	NOUN
fuelectenerg-1260	136	13	foundry	foundry	NOUN
fuelectenerg-1260	136	14	,	,	PUNCT
fuelectenerg-1260	136	15	capable	capable	ADJ
fuelectenerg-1260	136	16	of	of	ADP
fuelectenerg-1260	136	17	handling	handle	VERB
fuelectenerg-1260	136	18	around	around	ADP
fuelectenerg-1260	136	19	200	200	NUM
fuelectenerg-1260	136	20	processing	processing	NOUN
fuelectenerg-1260	136	21	steps	step	NOUN
fuelectenerg-1260	136	22	and	and	CCONJ
fuelectenerg-1260	136	23	very	very	ADV
fuelectenerg-1260	136	24	expensive	expensive	ADJ
fuelectenerg-1260	136	25	equipment	equipment	NOUN
fuelectenerg-1260	136	26	.	.	PUNCT
fuelectenerg-1260	137	1	some	some	DET
fuelectenerg-1260	137	2	processing	processing	NOUN
fuelectenerg-1260	137	3	steps	step	NOUN
fuelectenerg-1260	137	4	that	that	PRON
fuelectenerg-1260	137	5	require	require	VERB
fuelectenerg-1260	137	6	very	very	ADV
fuelectenerg-1260	137	7	specialized	specialized	ADJ
fuelectenerg-1260	137	8	equipment	equipment	NOUN
fuelectenerg-1260	137	9	or	or	CCONJ
fuelectenerg-1260	137	10	processing	processing	NOUN
fuelectenerg-1260	137	11	facilities	facility	NOUN
fuelectenerg-1260	137	12	may	may	AUX
fuelectenerg-1260	137	13	be	be	AUX
fuelectenerg-1260	137	14	outsourced	outsource	VERB
fuelectenerg-1260	137	15	to	to	ADP
fuelectenerg-1260	137	16	other	other	ADJ
fuelectenerg-1260	137	17	foundries	foundry	NOUN
fuelectenerg-1260	137	18	.	.	PUNCT
fuelectenerg-1260	138	1	experimental	experimental	ADJ
fuelectenerg-1260	138	2	implementations	implementation	NOUN
fuelectenerg-1260	138	3	are	be	AUX
fuelectenerg-1260	138	4	fundamental	fundamental	ADJ
fuelectenerg-1260	138	5	for	for	ADP
fuelectenerg-1260	138	6	frontier	frontier	NOUN
fuelectenerg-1260	138	7	research	research	NOUN
fuelectenerg-1260	138	8	.	.	PUNCT
fuelectenerg-1260	139	1	due	due	ADP
fuelectenerg-1260	139	2	to	to	ADP
fuelectenerg-1260	139	3	the	the	DET
fuelectenerg-1260	139	4	high	high	ADJ
fuelectenerg-1260	139	5	costs	cost	NOUN
fuelectenerg-1260	139	6	,	,	PUNCT
fuelectenerg-1260	139	7	research	research	NOUN
fuelectenerg-1260	139	8	centres	centre	NOUN
fuelectenerg-1260	139	9	are	be	AUX
fuelectenerg-1260	139	10	often	often	ADV
fuelectenerg-1260	139	11	equipped	equip	VERB
fuelectenerg-1260	139	12	with	with	ADP
fuelectenerg-1260	139	13	whatever	whatever	DET
fuelectenerg-1260	139	14	funding	funding	NOUN
fuelectenerg-1260	139	15	allows	allow	VERB
fuelectenerg-1260	139	16	and	and	CCONJ
fuelectenerg-1260	139	17	sometimes	sometimes	ADV
fuelectenerg-1260	139	18	fabrication	fabrication	NOUN
fuelectenerg-1260	139	19	steps	step	NOUN
fuelectenerg-1260	139	20	have	have	VERB
fuelectenerg-1260	139	21	to	to	PART
fuelectenerg-1260	139	22	be	be	AUX
fuelectenerg-1260	139	23	carried	carry	VERB
fuelectenerg-1260	139	24	out	out	ADP
fuelectenerg-1260	139	25	at	at	ADP
fuelectenerg-1260	139	26	industrial	industrial	ADJ
fuelectenerg-1260	139	27	facilities	facility	NOUN
fuelectenerg-1260	139	28	.	.	PUNCT
fuelectenerg-1260	140	1	the	the	DET
fuelectenerg-1260	140	2	collaboration	collaboration	NOUN
fuelectenerg-1260	140	3	between	between	ADP
fuelectenerg-1260	140	4	research	research	NOUN
fuelectenerg-1260	140	5	institutes	institute	NOUN
fuelectenerg-1260	140	6	and	and	CCONJ
fuelectenerg-1260	140	7	fabricants	fabricant	NOUN
fuelectenerg-1260	140	8	providing	provide	VERB
fuelectenerg-1260	140	9	service	service	NOUN
fuelectenerg-1260	140	10	for	for	ADP
fuelectenerg-1260	140	11	prototyping	prototyping	NOUN
fuelectenerg-1260	140	12	and	and	CCONJ
fuelectenerg-1260	140	13	fabrication	fabrication	NOUN
fuelectenerg-1260	140	14	is	be	AUX
fuelectenerg-1260	140	15	a	a	DET
fuelectenerg-1260	140	16	convenient	convenient	ADJ
fuelectenerg-1260	140	17	way	way	NOUN
fuelectenerg-1260	140	18	to	to	PART
fuelectenerg-1260	140	19	overcome	overcome	VERB
fuelectenerg-1260	140	20	shortages	shortage	NOUN
fuelectenerg-1260	140	21	for	for	ADP
fuelectenerg-1260	140	22	mutual	mutual	ADJ
fuelectenerg-1260	140	23	benefit	benefit	NOUN
fuelectenerg-1260	140	24	,	,	PUNCT
fuelectenerg-1260	140	25	sometimes	sometimes	ADV
fuelectenerg-1260	140	26	even	even	ADV
fuelectenerg-1260	140	27	sponsoring	sponsor	VERB
fuelectenerg-1260	140	28	research	research	NOUN
fuelectenerg-1260	140	29	[	[	X
fuelectenerg-1260	140	30	24	24	NUM
fuelectenerg-1260	140	31	]	]	PUNCT
fuelectenerg-1260	140	32	.	.	PUNCT
fuelectenerg-1260	141	1	16	16	NUM
fuelectenerg-1260	141	2	r.	r.	PROPN
fuelectenerg-1260	141	3	sitte	sitte	PROPN
fuelectenerg-1260	141	4	a	a	DET
fuelectenerg-1260	141	5	vast	vast	ADJ
fuelectenerg-1260	141	6	range	range	NOUN
fuelectenerg-1260	141	7	of	of	ADP
fuelectenerg-1260	141	8	technologies	technology	NOUN
fuelectenerg-1260	141	9	have	have	AUX
fuelectenerg-1260	141	10	been	be	AUX
fuelectenerg-1260	141	11	developed	develop	VERB
fuelectenerg-1260	141	12	and	and	CCONJ
fuelectenerg-1260	141	13	there	there	PRON
fuelectenerg-1260	141	14	is	be	VERB
fuelectenerg-1260	141	15	more	more	ADJ
fuelectenerg-1260	141	16	to	to	PART
fuelectenerg-1260	141	17	come	come	VERB
fuelectenerg-1260	141	18	.	.	PUNCT
fuelectenerg-1260	142	1	nowadays	nowadays	ADV
fuelectenerg-1260	142	2	mems	mem	NOUN
fuelectenerg-1260	142	3	are	be	AUX
fuelectenerg-1260	142	4	not	not	PART
fuelectenerg-1260	142	5	only	only	ADV
fuelectenerg-1260	142	6	made	make	VERB
fuelectenerg-1260	142	7	of	of	ADP
fuelectenerg-1260	142	8	silicon	silicon	NOUN
fuelectenerg-1260	142	9	but	but	CCONJ
fuelectenerg-1260	142	10	other	other	ADJ
fuelectenerg-1260	142	11	materials	material	NOUN
fuelectenerg-1260	142	12	are	be	AUX
fuelectenerg-1260	142	13	used	use	VERB
fuelectenerg-1260	142	14	,	,	PUNCT
fuelectenerg-1260	142	15	for	for	ADP
fuelectenerg-1260	142	16	example	example	NOUN
fuelectenerg-1260	142	17	,	,	PUNCT
fuelectenerg-1260	142	18	glass	glass	NOUN
fuelectenerg-1260	142	19	,	,	PUNCT
fuelectenerg-1260	142	20	photoresists	photoresist	NOUN
fuelectenerg-1260	142	21	or	or	CCONJ
fuelectenerg-1260	142	22	other	other	ADJ
fuelectenerg-1260	142	23	polymers	polymer	NOUN
fuelectenerg-1260	142	24	that	that	PRON
fuelectenerg-1260	142	25	can	can	AUX
fuelectenerg-1260	142	26	be	be	AUX
fuelectenerg-1260	142	27	patterned	pattern	VERB
fuelectenerg-1260	142	28	by	by	ADP
fuelectenerg-1260	142	29	laser	laser	NOUN
fuelectenerg-1260	142	30	,	,	PUNCT
fuelectenerg-1260	142	31	rapid	rapid	ADJ
fuelectenerg-1260	142	32	ion	ion	NOUN
fuelectenerg-1260	142	33	etching	etch	VERB
fuelectenerg-1260	142	34	(	(	PUNCT
fuelectenerg-1260	142	35	rie	rie	NOUN
fuelectenerg-1260	142	36	)	)	PUNCT
fuelectenerg-1260	142	37	or	or	CCONJ
fuelectenerg-1260	142	38	other	other	ADJ
fuelectenerg-1260	142	39	technologies	technology	NOUN
fuelectenerg-1260	142	40	.	.	PUNCT
fuelectenerg-1260	143	1	for	for	ADP
fuelectenerg-1260	143	2	example	example	NOUN
fuelectenerg-1260	143	3	,	,	PUNCT
fuelectenerg-1260	143	4	desbiens	desbien	VERB
fuelectenerg-1260	143	5	et	et	PROPN
fuelectenerg-1260	143	6	al	al	PROPN
fuelectenerg-1260	143	7	.	.	PROPN
fuelectenerg-1260	143	8	found	find	VERB
fuelectenerg-1260	143	9	that	that	SCONJ
fuelectenerg-1260	143	10	for	for	ADP
fuelectenerg-1260	143	11	prototyping	prototyping	NOUN
fuelectenerg-1260	143	12	,	,	PUNCT
fuelectenerg-1260	143	13	an	an	DET
fuelectenerg-1260	143	14	excimer	excimer	NOUN
fuelectenerg-1260	143	15	laser	laser	NOUN
fuelectenerg-1260	143	16	(	(	PUNCT
fuelectenerg-1260	143	17	uv	uv	NOUN
fuelectenerg-1260	143	18	laser	laser	NOUN
fuelectenerg-1260	143	19	)	)	PUNCT
fuelectenerg-1260	143	20	can	can	AUX
fuelectenerg-1260	143	21	be	be	AUX
fuelectenerg-1260	143	22	used	use	VERB
fuelectenerg-1260	143	23	for	for	ADP
fuelectenerg-1260	143	24	the	the	DET
fuelectenerg-1260	143	25	removal	removal	NOUN
fuelectenerg-1260	143	26	of	of	ADP
fuelectenerg-1260	143	27	materials	material	NOUN
fuelectenerg-1260	143	28	(	(	PUNCT
fuelectenerg-1260	143	29	ablation	ablation	NOUN
fuelectenerg-1260	143	30	)	)	PUNCT
fuelectenerg-1260	143	31	for	for	ADP
fuelectenerg-1260	143	32	mems	mem	NOUN
fuelectenerg-1260	143	33	micromachining	micromachining	NOUN
fuelectenerg-1260	143	34	of	of	ADP
fuelectenerg-1260	143	35	3d	3d	NUM
fuelectenerg-1260	143	36	structures	structure	NOUN
fuelectenerg-1260	143	37	in	in	ADP
fuelectenerg-1260	143	38	approximately	approximately	ADV
fuelectenerg-1260	143	39	1	1	NUM
fuelectenerg-1260	143	40	-	-	SYM
fuelectenerg-1260	143	41	5	5	NUM
fuelectenerg-1260	143	42	m	m	PROPN
fuelectenerg-1260	143	43	range	range	NOUN
fuelectenerg-1260	143	44	.	.	PUNCT
fuelectenerg-1260	144	1	their	their	PRON
fuelectenerg-1260	144	2	research	research	NOUN
fuelectenerg-1260	144	3	studied	study	VERB
fuelectenerg-1260	144	4	the	the	DET
fuelectenerg-1260	144	5	interactions	interaction	NOUN
fuelectenerg-1260	144	6	of	of	ADP
fuelectenerg-1260	144	7	repetition	repetition	NOUN
fuelectenerg-1260	144	8	rate	rate	NOUN
fuelectenerg-1260	144	9	and	and	CCONJ
fuelectenerg-1260	144	10	mask	mask	NOUN
fuelectenerg-1260	144	11	dragging	drag	VERB
fuelectenerg-1260	144	12	speed	speed	NOUN
fuelectenerg-1260	144	13	as	as	ADP
fuelectenerg-1260	144	14	parameters	parameter	NOUN
fuelectenerg-1260	144	15	in	in	ADP
fuelectenerg-1260	144	16	a	a	DET
fuelectenerg-1260	144	17	systematic	systematic	ADJ
fuelectenerg-1260	144	18	study	study	NOUN
fuelectenerg-1260	144	19	and	and	CCONJ
fuelectenerg-1260	144	20	measured	measure	VERB
fuelectenerg-1260	144	21	the	the	DET
fuelectenerg-1260	144	22	etch	etch	NOUN
fuelectenerg-1260	144	23	rate	rate	NOUN
fuelectenerg-1260	144	24	of	of	ADP
fuelectenerg-1260	144	25	material	material	NOUN
fuelectenerg-1260	144	26	on	on	ADP
fuelectenerg-1260	144	27	samples	sample	NOUN
fuelectenerg-1260	144	28	of	of	ADP
fuelectenerg-1260	144	29	different	different	ADJ
fuelectenerg-1260	144	30	materials	material	NOUN
fuelectenerg-1260	144	31	,	,	PUNCT
fuelectenerg-1260	144	32	si	si	NOUN
fuelectenerg-1260	144	33	,	,	PUNCT
fuelectenerg-1260	144	34	pzt	pzt	NOUN
fuelectenerg-1260	144	35	and	and	CCONJ
fuelectenerg-1260	144	36	pyrex	pyrex	NOUN
fuelectenerg-1260	145	1	[	[	X
fuelectenerg-1260	145	2	25	25	NUM
fuelectenerg-1260	145	3	]	]	PUNCT
fuelectenerg-1260	145	4	.	.	PUNCT
fuelectenerg-1260	146	1	delille	delille	PROPN
fuelectenerg-1260	146	2	et	et	PROPN
fuelectenerg-1260	146	3	al	al	PROPN
fuelectenerg-1260	146	4	.	.	PROPN
fuelectenerg-1260	146	5	have	have	AUX
fuelectenerg-1260	146	6	shown	show	VERB
fuelectenerg-1260	146	7	how	how	SCONJ
fuelectenerg-1260	146	8	photopatternable	photopatternable	ADJ
fuelectenerg-1260	146	9	uv	uv	NOUN
fuelectenerg-1260	146	10	sensitive	sensitive	ADJ
fuelectenerg-1260	146	11	adhesives	adhesive	NOUN
fuelectenerg-1260	146	12	can	can	AUX
fuelectenerg-1260	146	13	be	be	AUX
fuelectenerg-1260	146	14	used	use	VERB
fuelectenerg-1260	146	15	for	for	ADP
fuelectenerg-1260	146	16	patterning	pattern	VERB
fuelectenerg-1260	146	17	up	up	ADP
fuelectenerg-1260	146	18	to	to	PART
fuelectenerg-1260	146	19	1	1	NUM
fuelectenerg-1260	146	20	cm	cm	NOUN
fuelectenerg-1260	146	21	thickness	thickness	NOUN
fuelectenerg-1260	146	22	.	.	PUNCT
fuelectenerg-1260	147	1	the	the	DET
fuelectenerg-1260	147	2	benefit	benefit	NOUN
fuelectenerg-1260	147	3	is	be	AUX
fuelectenerg-1260	147	4	that	that	SCONJ
fuelectenerg-1260	147	5	the	the	DET
fuelectenerg-1260	147	6	process	process	NOUN
fuelectenerg-1260	147	7	is	be	AUX
fuelectenerg-1260	147	8	low	low	ADJ
fuelectenerg-1260	147	9	cost	cost	NOUN
fuelectenerg-1260	147	10	and	and	CCONJ
fuelectenerg-1260	147	11	requires	require	VERB
fuelectenerg-1260	147	12	no	no	DET
fuelectenerg-1260	147	13	baking	baking	NOUN
fuelectenerg-1260	147	14	and	and	CCONJ
fuelectenerg-1260	147	15	does	do	AUX
fuelectenerg-1260	147	16	not	not	PART
fuelectenerg-1260	147	17	even	even	ADV
fuelectenerg-1260	147	18	require	require	VERB
fuelectenerg-1260	147	19	a	a	DET
fuelectenerg-1260	147	20	cleanroom	cleanroom	NOUN
fuelectenerg-1260	147	21	.	.	PUNCT
fuelectenerg-1260	148	1	some	some	PRON
fuelectenerg-1260	148	2	of	of	ADP
fuelectenerg-1260	148	3	these	these	DET
fuelectenerg-1260	148	4	polymers	polymer	NOUN
fuelectenerg-1260	148	5	bond	bond	NOUN
fuelectenerg-1260	148	6	irreversibly	irreversibly	ADV
fuelectenerg-1260	148	7	to	to	ADP
fuelectenerg-1260	148	8	glass	glass	NOUN
fuelectenerg-1260	148	9	and	and	CCONJ
fuelectenerg-1260	148	10	they	they	PRON
fuelectenerg-1260	148	11	can	can	AUX
fuelectenerg-1260	148	12	be	be	AUX
fuelectenerg-1260	148	13	compatible	compatible	ADJ
fuelectenerg-1260	148	14	with	with	ADP
fuelectenerg-1260	148	15	living	live	VERB
fuelectenerg-1260	148	16	cells	cell	NOUN
fuelectenerg-1260	148	17	[	[	X
fuelectenerg-1260	148	18	26	26	NUM
fuelectenerg-1260	148	19	]	]	PUNCT
fuelectenerg-1260	148	20	.	.	PUNCT
fuelectenerg-1260	149	1	due	due	ADP
fuelectenerg-1260	149	2	to	to	ADP
fuelectenerg-1260	149	3	the	the	DET
fuelectenerg-1260	149	4	ability	ability	NOUN
fuelectenerg-1260	149	5	to	to	PART
fuelectenerg-1260	149	6	work	work	VERB
fuelectenerg-1260	149	7	in	in	ADP
fuelectenerg-1260	149	8	any	any	DET
fuelectenerg-1260	149	9	room	room	NOUN
fuelectenerg-1260	149	10	and	and	CCONJ
fuelectenerg-1260	149	11	under	under	ADP
fuelectenerg-1260	149	12	any	any	DET
fuelectenerg-1260	149	13	light	light	ADJ
fuelectenerg-1260	149	14	condition	condition	NOUN
fuelectenerg-1260	149	15	,	,	PUNCT
fuelectenerg-1260	149	16	makes	make	VERB
fuelectenerg-1260	149	17	their	their	PRON
fuelectenerg-1260	149	18	findings	finding	NOUN
fuelectenerg-1260	149	19	suitable	suitable	ADJ
fuelectenerg-1260	149	20	for	for	ADP
fuelectenerg-1260	149	21	education	education	NOUN
fuelectenerg-1260	149	22	purposes	purpose	NOUN
fuelectenerg-1260	149	23	of	of	ADP
fuelectenerg-1260	149	24	mems	mem	NOUN
fuelectenerg-1260	149	25	fabrication	fabrication	NOUN
fuelectenerg-1260	149	26	.	.	PUNCT
fuelectenerg-1260	150	1	material	material	NOUN
fuelectenerg-1260	150	2	deposition	deposition	NOUN
fuelectenerg-1260	150	3	by	by	ADP
fuelectenerg-1260	150	4	3d	3d	NOUN
fuelectenerg-1260	150	5	printing	printing	NOUN
fuelectenerg-1260	150	6	is	be	AUX
fuelectenerg-1260	150	7	becoming	become	VERB
fuelectenerg-1260	150	8	popular	popular	ADJ
fuelectenerg-1260	150	9	,	,	PUNCT
fuelectenerg-1260	150	10	but	but	CCONJ
fuelectenerg-1260	150	11	all	all	PRON
fuelectenerg-1260	150	12	depends	depend	VERB
fuelectenerg-1260	150	13	on	on	ADP
fuelectenerg-1260	150	14	the	the	DET
fuelectenerg-1260	150	15	purpose	purpose	NOUN
fuelectenerg-1260	150	16	of	of	ADP
fuelectenerg-1260	150	17	the	the	DET
fuelectenerg-1260	150	18	mems	mem	NOUN
fuelectenerg-1260	150	19	.	.	PUNCT
fuelectenerg-1260	151	1	more	more	ADV
fuelectenerg-1260	151	2	about	about	ADP
fuelectenerg-1260	151	3	3d	3d	NUM
fuelectenerg-1260	151	4	printing	print	VERB
fuelectenerg-1260	151	5	further	far	ADV
fuelectenerg-1260	151	6	down	down	ADV
fuelectenerg-1260	151	7	.	.	PUNCT
fuelectenerg-1260	152	1	to	to	PART
fuelectenerg-1260	152	2	power	power	VERB
fuelectenerg-1260	152	3	a	a	DET
fuelectenerg-1260	152	4	mems	mems	PROPN
fuelectenerg-1260	152	5	requires	require	VERB
fuelectenerg-1260	152	6	some	some	DET
fuelectenerg-1260	152	7	source	source	NOUN
fuelectenerg-1260	152	8	of	of	ADP
fuelectenerg-1260	152	9	energy	energy	NOUN
fuelectenerg-1260	152	10	.	.	PUNCT
fuelectenerg-1260	153	1	for	for	ADP
fuelectenerg-1260	153	2	medical	medical	ADJ
fuelectenerg-1260	153	3	mems	mem	NOUN
fuelectenerg-1260	153	4	implant	implant	ADJ
fuelectenerg-1260	153	5	applications	application	NOUN
fuelectenerg-1260	153	6	or	or	CCONJ
fuelectenerg-1260	153	7	situations	situation	NOUN
fuelectenerg-1260	153	8	where	where	SCONJ
fuelectenerg-1260	153	9	mems	mems	ADJ
fuelectenerg-1260	153	10	application	application	NOUN
fuelectenerg-1260	153	11	requires	require	VERB
fuelectenerg-1260	153	12	independence	independence	NOUN
fuelectenerg-1260	153	13	from	from	ADP
fuelectenerg-1260	153	14	a	a	DET
fuelectenerg-1260	153	15	clumsy	clumsy	ADJ
fuelectenerg-1260	153	16	battery	battery	NOUN
fuelectenerg-1260	153	17	this	this	PRON
fuelectenerg-1260	153	18	means	mean	VERB
fuelectenerg-1260	153	19	an	an	DET
fuelectenerg-1260	153	20	additional	additional	ADJ
fuelectenerg-1260	153	21	difficulty	difficulty	NOUN
fuelectenerg-1260	153	22	.	.	PUNCT
fuelectenerg-1260	154	1	this	this	PRON
fuelectenerg-1260	154	2	leads	lead	VERB
fuelectenerg-1260	154	3	to	to	ADP
fuelectenerg-1260	154	4	a	a	DET
fuelectenerg-1260	154	5	niche	niche	NOUN
fuelectenerg-1260	154	6	for	for	ADP
fuelectenerg-1260	154	7	technologies	technology	NOUN
fuelectenerg-1260	154	8	and	and	CCONJ
fuelectenerg-1260	154	9	materials	material	NOUN
fuelectenerg-1260	154	10	to	to	PART
fuelectenerg-1260	154	11	harvest	harvest	VERB
fuelectenerg-1260	154	12	energy	energy	NOUN
fuelectenerg-1260	154	13	and	and	CCONJ
fuelectenerg-1260	154	14	supply	supply	NOUN
fuelectenerg-1260	154	15	to	to	PART
fuelectenerg-1260	154	16	power	power	NOUN
fuelectenerg-1260	154	17	a	a	DET
fuelectenerg-1260	154	18	mems	mem	NOUN
fuelectenerg-1260	154	19	.	.	PUNCT
fuelectenerg-1260	155	1	iniewski	iniewski	PROPN
fuelectenerg-1260	155	2	et	et	PROPN
fuelectenerg-1260	155	3	al	al	PROPN
fuelectenerg-1260	155	4	.	.	PROPN
fuelectenerg-1260	156	1	present	present	VERB
fuelectenerg-1260	156	2	a	a	DET
fuelectenerg-1260	156	3	good	good	ADJ
fuelectenerg-1260	156	4	introduction	introduction	NOUN
fuelectenerg-1260	156	5	to	to	ADP
fuelectenerg-1260	156	6	this	this	DET
fuelectenerg-1260	156	7	area	area	NOUN
fuelectenerg-1260	156	8	about	about	ADP
fuelectenerg-1260	156	9	such	such	ADJ
fuelectenerg-1260	156	10	materials	material	NOUN
fuelectenerg-1260	156	11	and	and	CCONJ
fuelectenerg-1260	156	12	technologies	technology	NOUN
fuelectenerg-1260	156	13	[	[	X
fuelectenerg-1260	156	14	27	27	NUM
fuelectenerg-1260	156	15	]	]	X
fuelectenerg-1260	156	16	bermejo	bermejo	ADJ
fuelectenerg-1260	156	17	and	and	CCONJ
fuelectenerg-1260	156	18	castañer	castañer	PROPN
fuelectenerg-1260	156	19	have	have	AUX
fuelectenerg-1260	156	20	studied	study	VERB
fuelectenerg-1260	156	21	to	to	PART
fuelectenerg-1260	156	22	drive	drive	VERB
fuelectenerg-1260	156	23	mems	mem	NOUN
fuelectenerg-1260	156	24	electrostatic	electrostatic	ADJ
fuelectenerg-1260	156	25	actuators	actuator	NOUN
fuelectenerg-1260	156	26	with	with	ADP
fuelectenerg-1260	156	27	a	a	DET
fuelectenerg-1260	156	28	direct	direct	ADJ
fuelectenerg-1260	156	29	photovoltaic	photovoltaic	NOUN
fuelectenerg-1260	156	30	(	(	PUNCT
fuelectenerg-1260	156	31	pv	pv	NOUN
fuelectenerg-1260	156	32	)	)	PUNCT
fuelectenerg-1260	156	33	source	source	NOUN
fuelectenerg-1260	156	34	.	.	PUNCT
fuelectenerg-1260	157	1	the	the	DET
fuelectenerg-1260	157	2	benefits	benefit	NOUN
fuelectenerg-1260	157	3	are	be	AUX
fuelectenerg-1260	157	4	that	that	SCONJ
fuelectenerg-1260	157	5	the	the	DET
fuelectenerg-1260	157	6	number	number	NOUN
fuelectenerg-1260	157	7	of	of	ADP
fuelectenerg-1260	157	8	solar	solar	ADJ
fuelectenerg-1260	157	9	cells	cell	NOUN
fuelectenerg-1260	157	10	can	can	AUX
fuelectenerg-1260	157	11	be	be	AUX
fuelectenerg-1260	157	12	customized	customize	VERB
fuelectenerg-1260	157	13	for	for	ADP
fuelectenerg-1260	157	14	specific	specific	ADJ
fuelectenerg-1260	157	15	mems	mem	NOUN
fuelectenerg-1260	157	16	switches	switch	NOUN
fuelectenerg-1260	157	17	and	and	CCONJ
fuelectenerg-1260	157	18	better	well	ADJ
fuelectenerg-1260	157	19	performance	performance	NOUN
fuelectenerg-1260	157	20	with	with	ADP
fuelectenerg-1260	157	21	increased	increase	VERB
fuelectenerg-1260	157	22	reliability	reliability	NOUN
fuelectenerg-1260	157	23	[	[	X
fuelectenerg-1260	157	24	28	28	NUM
fuelectenerg-1260	157	25	]	]	PUNCT
fuelectenerg-1260	157	26	.	.	PUNCT
fuelectenerg-1260	158	1	3	3	X
fuelectenerg-1260	158	2	.	.	PUNCT
fuelectenerg-1260	158	3	tools	tool	NOUN
fuelectenerg-1260	158	4	for	for	ADP
fuelectenerg-1260	158	5	modelling	modelling	NOUN
fuelectenerg-1260	158	6	and	and	CCONJ
fuelectenerg-1260	158	7	simulation	simulation	NOUN
fuelectenerg-1260	158	8	this	this	DET
fuelectenerg-1260	158	9	section	section	NOUN
fuelectenerg-1260	158	10	explains	explain	VERB
fuelectenerg-1260	158	11	the	the	DET
fuelectenerg-1260	158	12	evolution	evolution	NOUN
fuelectenerg-1260	158	13	and	and	CCONJ
fuelectenerg-1260	158	14	need	need	NOUN
fuelectenerg-1260	158	15	of	of	ADP
fuelectenerg-1260	158	16	cad	cad	PROPN
fuelectenerg-1260	158	17	systems	system	NOUN
fuelectenerg-1260	158	18	for	for	ADP
fuelectenerg-1260	158	19	mems	mem	NOUN
fuelectenerg-1260	158	20	.	.	PUNCT
fuelectenerg-1260	159	1	it	it	PRON
fuelectenerg-1260	159	2	also	also	ADV
fuelectenerg-1260	159	3	shows	show	VERB
fuelectenerg-1260	159	4	with	with	ADP
fuelectenerg-1260	159	5	examples	example	NOUN
fuelectenerg-1260	159	6	the	the	DET
fuelectenerg-1260	159	7	vast	vast	ADJ
fuelectenerg-1260	159	8	diversity	diversity	NOUN
fuelectenerg-1260	159	9	of	of	ADP
fuelectenerg-1260	159	10	problems	problem	NOUN
fuelectenerg-1260	159	11	that	that	PRON
fuelectenerg-1260	159	12	appear	appear	VERB
fuelectenerg-1260	159	13	and	and	CCONJ
fuelectenerg-1260	159	14	need	need	VERB
fuelectenerg-1260	159	15	to	to	PART
fuelectenerg-1260	159	16	be	be	AUX
fuelectenerg-1260	159	17	addressed	address	VERB
fuelectenerg-1260	159	18	.	.	PUNCT
fuelectenerg-1260	160	1	mems	mem	NOUN
fuelectenerg-1260	160	2	design	design	NOUN
fuelectenerg-1260	160	3	and	and	CCONJ
fuelectenerg-1260	160	4	fabrication	fabrication	NOUN
fuelectenerg-1260	160	5	requires	require	VERB
fuelectenerg-1260	160	6	a	a	DET
fuelectenerg-1260	160	7	range	range	NOUN
fuelectenerg-1260	160	8	of	of	ADP
fuelectenerg-1260	160	9	modelling	model	VERB
fuelectenerg-1260	160	10	techniques	technique	NOUN
fuelectenerg-1260	160	11	at	at	ADP
fuelectenerg-1260	160	12	different	different	ADJ
fuelectenerg-1260	160	13	stages	stage	NOUN
fuelectenerg-1260	160	14	.	.	PUNCT
fuelectenerg-1260	161	1	on	on	ADP
fuelectenerg-1260	161	2	one	one	NUM
fuelectenerg-1260	161	3	hand	hand	NOUN
fuelectenerg-1260	161	4	,	,	PUNCT
fuelectenerg-1260	161	5	we	we	PRON
fuelectenerg-1260	161	6	have	have	VERB
fuelectenerg-1260	161	7	the	the	DET
fuelectenerg-1260	161	8	mechanical	mechanical	ADJ
fuelectenerg-1260	161	9	and	and	CCONJ
fuelectenerg-1260	161	10	circuit	circuit	NOUN
fuelectenerg-1260	161	11	modelling	modelling	NOUN
fuelectenerg-1260	161	12	for	for	ADP
fuelectenerg-1260	161	13	the	the	DET
fuelectenerg-1260	161	14	functioning	functioning	NOUN
fuelectenerg-1260	161	15	of	of	ADP
fuelectenerg-1260	161	16	the	the	DET
fuelectenerg-1260	161	17	mems	mem	NOUN
fuelectenerg-1260	161	18	.	.	PUNCT
fuelectenerg-1260	162	1	on	on	ADP
fuelectenerg-1260	162	2	the	the	DET
fuelectenerg-1260	162	3	other	other	ADJ
fuelectenerg-1260	162	4	hand	hand	NOUN
fuelectenerg-1260	162	5	,	,	PUNCT
fuelectenerg-1260	162	6	we	we	PRON
fuelectenerg-1260	162	7	have	have	VERB
fuelectenerg-1260	162	8	the	the	DET
fuelectenerg-1260	162	9	fabrication	fabrication	NOUN
fuelectenerg-1260	162	10	design	design	NOUN
fuelectenerg-1260	162	11	and	and	CCONJ
fuelectenerg-1260	162	12	experimentation	experimentation	NOUN
fuelectenerg-1260	162	13	with	with	ADP
fuelectenerg-1260	162	14	physical	physical	ADJ
fuelectenerg-1260	162	15	modelling	modelling	NOUN
fuelectenerg-1260	162	16	to	to	PART
fuelectenerg-1260	162	17	find	find	VERB
fuelectenerg-1260	162	18	out	out	ADP
fuelectenerg-1260	162	19	desired	desire	VERB
fuelectenerg-1260	162	20	properties	property	NOUN
fuelectenerg-1260	162	21	of	of	ADP
fuelectenerg-1260	162	22	our	our	PRON
fuelectenerg-1260	162	23	object	object	NOUN
fuelectenerg-1260	162	24	mems	mem	NOUN
fuelectenerg-1260	162	25	.	.	PUNCT
fuelectenerg-1260	163	1	for	for	ADP
fuelectenerg-1260	163	2	cad	cad	NOUN
fuelectenerg-1260	163	3	tools	tool	NOUN
fuelectenerg-1260	163	4	,	,	PUNCT
fuelectenerg-1260	163	5	we	we	PRON
fuelectenerg-1260	163	6	have	have	VERB
fuelectenerg-1260	163	7	to	to	PART
fuelectenerg-1260	163	8	distinguish	distinguish	VERB
fuelectenerg-1260	163	9	the	the	DET
fuelectenerg-1260	163	10	mathematical	mathematical	ADJ
fuelectenerg-1260	163	11	modelling	modelling	NOUN
fuelectenerg-1260	163	12	and	and	CCONJ
fuelectenerg-1260	163	13	the	the	DET
fuelectenerg-1260	163	14	visual	visual	ADJ
fuelectenerg-1260	163	15	images	image	NOUN
fuelectenerg-1260	163	16	providing	provide	VERB
fuelectenerg-1260	163	17	information	information	NOUN
fuelectenerg-1260	163	18	about	about	ADP
fuelectenerg-1260	163	19	what	what	PRON
fuelectenerg-1260	163	20	we	we	PRON
fuelectenerg-1260	163	21	are	be	AUX
fuelectenerg-1260	163	22	modelling	model	VERB
fuelectenerg-1260	163	23	.	.	PUNCT
fuelectenerg-1260	164	1	mathematical	mathematical	ADJ
fuelectenerg-1260	164	2	modelling	modelling	NOUN
fuelectenerg-1260	164	3	(	(	PUNCT
fuelectenerg-1260	164	4	mm	mm	INTJ
fuelectenerg-1260	164	5	)	)	PUNCT
fuelectenerg-1260	164	6	is	be	AUX
fuelectenerg-1260	164	7	essential	essential	ADJ
fuelectenerg-1260	164	8	in	in	ADP
fuelectenerg-1260	164	9	device	device	NOUN
fuelectenerg-1260	164	10	design	design	NOUN
fuelectenerg-1260	164	11	.	.	PUNCT
fuelectenerg-1260	165	1	mms	mms	PROPN
fuelectenerg-1260	165	2	are	be	AUX
fuelectenerg-1260	165	3	also	also	ADV
fuelectenerg-1260	165	4	the	the	DET
fuelectenerg-1260	165	5	underlying	underlying	ADJ
fuelectenerg-1260	165	6	simulation	simulation	NOUN
fuelectenerg-1260	165	7	tool	tool	NOUN
fuelectenerg-1260	165	8	for	for	ADP
fuelectenerg-1260	165	9	mems	mems	PROPN
fuelectenerg-1260	165	10	cad	cad	PROPN
fuelectenerg-1260	165	11	software	software	NOUN
fuelectenerg-1260	165	12	.	.	PUNCT
fuelectenerg-1260	166	1	without	without	ADP
fuelectenerg-1260	166	2	it	it	PRON
fuelectenerg-1260	166	3	,	,	PUNCT
fuelectenerg-1260	166	4	there	there	PRON
fuelectenerg-1260	166	5	can	can	AUX
fuelectenerg-1260	166	6	be	be	AUX
fuelectenerg-1260	166	7	no	no	DET
fuelectenerg-1260	166	8	serious	serious	ADJ
fuelectenerg-1260	166	9	outcome	outcome	NOUN
fuelectenerg-1260	166	10	in	in	ADP
fuelectenerg-1260	166	11	mems	mems	PROPN
fuelectenerg-1260	166	12	design	design	NOUN
fuelectenerg-1260	166	13	.	.	PUNCT
fuelectenerg-1260	167	1	mm	mm	PROPN
fuelectenerg-1260	167	2	occurs	occur	VERB
fuelectenerg-1260	167	3	at	at	ADP
fuelectenerg-1260	167	4	different	different	ADJ
fuelectenerg-1260	167	5	levels	level	NOUN
fuelectenerg-1260	167	6	.	.	PUNCT
fuelectenerg-1260	168	1	napieralski	napieralski	PROPN
fuelectenerg-1260	168	2	et	et	PROPN
fuelectenerg-1260	168	3	al	al	PROPN
fuelectenerg-1260	168	4	.	.	PROPN
fuelectenerg-1260	168	5	have	have	AUX
fuelectenerg-1260	168	6	elaborated	elaborate	VERB
fuelectenerg-1260	168	7	an	an	DET
fuelectenerg-1260	168	8	interesting	interesting	ADJ
fuelectenerg-1260	168	9	work	work	NOUN
fuelectenerg-1260	168	10	on	on	ADP
fuelectenerg-1260	168	11	the	the	DET
fuelectenerg-1260	168	12	evolution	evolution	NOUN
fuelectenerg-1260	168	13	of	of	ADP
fuelectenerg-1260	168	14	mems	mem	NOUN
fuelectenerg-1260	168	15	and	and	CCONJ
fuelectenerg-1260	168	16	modelling	modelling	NOUN
fuelectenerg-1260	168	17	.	.	PUNCT
fuelectenerg-1260	169	1	they	they	PRON
fuelectenerg-1260	169	2	demonstrate	demonstrate	VERB
fuelectenerg-1260	169	3	how	how	SCONJ
fuelectenerg-1260	169	4	the	the	DET
fuelectenerg-1260	169	5	advances	advance	NOUN
fuelectenerg-1260	169	6	in	in	ADP
fuelectenerg-1260	169	7	mems	mem	NOUN
fuelectenerg-1260	169	8	technology	technology	NOUN
fuelectenerg-1260	169	9	and	and	CCONJ
fuelectenerg-1260	169	10	modelling	model	VERB
fuelectenerg-1260	169	11	methodologies	methodology	NOUN
fuelectenerg-1260	169	12	not	not	PART
fuelectenerg-1260	169	13	only	only	ADV
fuelectenerg-1260	169	14	depend	depend	VERB
fuelectenerg-1260	169	15	on	on	ADP
fuelectenerg-1260	169	16	each	each	DET
fuelectenerg-1260	169	17	other	other	ADJ
fuelectenerg-1260	169	18	but	but	CCONJ
fuelectenerg-1260	169	19	even	even	ADV
fuelectenerg-1260	169	20	drag	drag	VERB
fuelectenerg-1260	169	21	each	each	DET
fuelectenerg-1260	169	22	other	other	ADJ
fuelectenerg-1260	169	23	forward	forward	ADV
fuelectenerg-1260	170	1	[	[	X
fuelectenerg-1260	170	2	29	29	NUM
fuelectenerg-1260	170	3	]	]	PUNCT
fuelectenerg-1260	170	4	.	.	PUNCT
fuelectenerg-1260	171	1	lyshevski	lyshevski	PROPN
fuelectenerg-1260	171	2	provides	provide	VERB
fuelectenerg-1260	171	3	a	a	DET
fuelectenerg-1260	171	4	good	good	ADJ
fuelectenerg-1260	171	5	introduction	introduction	NOUN
fuelectenerg-1260	171	6	to	to	ADP
fuelectenerg-1260	171	7	the	the	DET
fuelectenerg-1260	171	8	fundamentals	fundamental	NOUN
fuelectenerg-1260	171	9	of	of	ADP
fuelectenerg-1260	171	10	mathematical	mathematical	ADJ
fuelectenerg-1260	171	11	and	and	CCONJ
fuelectenerg-1260	171	12	physical	physical	ADJ
fuelectenerg-1260	171	13	modelling	modelling	NOUN
fuelectenerg-1260	171	14	in	in	ADP
fuelectenerg-1260	171	15	context	context	NOUN
fuelectenerg-1260	171	16	with	with	ADP
fuelectenerg-1260	171	17	mems	mem	NOUN
fuelectenerg-1260	171	18	and	and	CCONJ
fuelectenerg-1260	171	19	nems	nem	NOUN
fuelectenerg-1260	171	20	structures	structure	NOUN
fuelectenerg-1260	171	21	[	[	X
fuelectenerg-1260	171	22	30	30	NUM
fuelectenerg-1260	171	23	]	]	PUNCT
fuelectenerg-1260	171	24	.	.	PUNCT
fuelectenerg-1260	172	1	these	these	DET
fuelectenerg-1260	172	2	models	model	NOUN
fuelectenerg-1260	172	3	are	be	AUX
fuelectenerg-1260	172	4	necessary	necessary	ADJ
fuelectenerg-1260	172	5	to	to	PART
fuelectenerg-1260	172	6	calculate	calculate	VERB
fuelectenerg-1260	172	7	the	the	DET
fuelectenerg-1260	172	8	dynamic	dynamic	ADJ
fuelectenerg-1260	172	9	behaviour	behaviour	NOUN
fuelectenerg-1260	172	10	of	of	ADP
fuelectenerg-1260	172	11	those	those	DET
fuelectenerg-1260	172	12	structures	structure	NOUN
fuelectenerg-1260	172	13	working	work	VERB
fuelectenerg-1260	172	14	together	together	ADV
fuelectenerg-1260	172	15	in	in	ADP
fuelectenerg-1260	172	16	a	a	DET
fuelectenerg-1260	172	17	purpose	purpose	NOUN
fuelectenerg-1260	172	18	or	or	CCONJ
fuelectenerg-1260	172	19	function	function	NOUN
fuelectenerg-1260	172	20	.	.	PUNCT
fuelectenerg-1260	173	1	in	in	ADP
fuelectenerg-1260	173	2	this	this	DET
fuelectenerg-1260	173	3	endeavour	endeavour	NOUN
fuelectenerg-1260	173	4	,	,	PUNCT
fuelectenerg-1260	173	5	further	further	ADJ
fuelectenerg-1260	173	6	calculations	calculation	NOUN
fuelectenerg-1260	173	7	are	be	AUX
fuelectenerg-1260	173	8	needed	need	VERB
fuelectenerg-1260	173	9	to	to	PART
fuelectenerg-1260	173	10	solve	solve	VERB
fuelectenerg-1260	173	11	the	the	DET
fuelectenerg-1260	173	12	resulting	result	VERB
fuelectenerg-1260	173	13	differential	differential	ADJ
fuelectenerg-1260	173	14	equations	equation	NOUN
fuelectenerg-1260	173	15	.	.	PUNCT
fuelectenerg-1260	174	1	this	this	PRON
fuelectenerg-1260	174	2	is	be	AUX
fuelectenerg-1260	174	3	done	do	VERB
fuelectenerg-1260	174	4	with	with	ADP
fuelectenerg-1260	174	5	numerical	numerical	ADJ
fuelectenerg-1260	174	6	calculations	calculation	NOUN
fuelectenerg-1260	174	7	,	,	PUNCT
fuelectenerg-1260	174	8	using	use	VERB
fuelectenerg-1260	174	9	solvers	solver	NOUN
fuelectenerg-1260	174	10	such	such	ADJ
fuelectenerg-1260	174	11	as	as	ADP
fuelectenerg-1260	174	12	matlab	matlab	PROPN
fuelectenerg-1260	174	13	tm	tm	PROPN
fuelectenerg-1260	174	14	and	and	CCONJ
fuelectenerg-1260	174	15	for	for	ADP
fuelectenerg-1260	174	16	mems	mem	NOUN
fuelectenerg-1260	174	17	in	in	ADP
fuelectenerg-1260	174	18	particular	particular	ADJ
fuelectenerg-1260	174	19	finite	finite	ADJ
fuelectenerg-1260	174	20	element	element	NOUN
fuelectenerg-1260	174	21	analysis	analysis	NOUN
fuelectenerg-1260	174	22	(	(	PUNCT
fuelectenerg-1260	174	23	fea	fea	NOUN
fuelectenerg-1260	174	24	)	)	PUNCT
fuelectenerg-1260	174	25	calculations	calculation	NOUN
fuelectenerg-1260	174	26	.	.	PUNCT
fuelectenerg-1260	175	1	comsol	comsol	NOUN
fuelectenerg-1260	175	2	multiphysics	multiphysics	PROPN
fuelectenerg-1260	175	3	tm	tm	PROPN
fuelectenerg-1260	175	4	is	be	AUX
fuelectenerg-1260	175	5	a	a	DET
fuelectenerg-1260	175	6	popular	popular	ADJ
fuelectenerg-1260	175	7	and	and	CCONJ
fuelectenerg-1260	175	8	steadily	steadily	ADV
fuelectenerg-1260	175	9	growing	grow	VERB
fuelectenerg-1260	175	10	environment	environment	NOUN
fuelectenerg-1260	175	11	for	for	ADP
fuelectenerg-1260	175	12	calculations	calculation	NOUN
fuelectenerg-1260	175	13	mems	mem	NOUN
fuelectenerg-1260	175	14	design	design	NOUN
fuelectenerg-1260	175	15	simplification	simplification	NOUN
fuelectenerg-1260	175	16	with	with	ADP
fuelectenerg-1260	175	17	virtual	virtual	ADJ
fuelectenerg-1260	175	18	prototyping	prototyping	NOUN
fuelectenerg-1260	175	19	17	17	NUM
fuelectenerg-1260	175	20	using	use	VERB
fuelectenerg-1260	175	21	finite	finite	ADJ
fuelectenerg-1260	175	22	elements	element	NOUN
fuelectenerg-1260	175	23	[	[	X
fuelectenerg-1260	175	24	31	31	NUM
fuelectenerg-1260	175	25	]	]	PUNCT
fuelectenerg-1260	175	26	.	.	PUNCT
fuelectenerg-1260	176	1	another	another	DET
fuelectenerg-1260	176	2	one	one	NOUN
fuelectenerg-1260	176	3	is	be	AUX
fuelectenerg-1260	176	4	ansys	ansys	PROPN
fuelectenerg-1260	176	5	tm	tm	PROPN
fuelectenerg-1260	176	6	.	.	PUNCT
fuelectenerg-1260	177	1	these	these	PRON
fuelectenerg-1260	177	2	are	be	AUX
fuelectenerg-1260	177	3	not	not	PART
fuelectenerg-1260	177	4	the	the	DET
fuelectenerg-1260	177	5	only	only	ADJ
fuelectenerg-1260	177	6	ones	one	NOUN
fuelectenerg-1260	177	7	;	;	PUNCT
fuelectenerg-1260	177	8	there	there	PRON
fuelectenerg-1260	177	9	are	be	VERB
fuelectenerg-1260	177	10	other	other	ADJ
fuelectenerg-1260	177	11	multiphysics	multiphysic	NOUN
fuelectenerg-1260	177	12	solvers	solver	NOUN
fuelectenerg-1260	177	13	.	.	PUNCT
fuelectenerg-1260	178	1	one	one	NUM
fuelectenerg-1260	178	2	important	important	ADJ
fuelectenerg-1260	178	3	step	step	NOUN
fuelectenerg-1260	178	4	in	in	ADP
fuelectenerg-1260	178	5	modelling	model	VERB
fuelectenerg-1260	178	6	mems	mem	NOUN
fuelectenerg-1260	178	7	is	be	AUX
fuelectenerg-1260	178	8	the	the	DET
fuelectenerg-1260	178	9	order	order	NOUN
fuelectenerg-1260	178	10	reduction	reduction	NOUN
fuelectenerg-1260	178	11	of	of	ADP
fuelectenerg-1260	178	12	differential	differential	ADJ
fuelectenerg-1260	178	13	equation	equation	NOUN
fuelectenerg-1260	178	14	systems	system	NOUN
fuelectenerg-1260	178	15	(	(	PUNCT
fuelectenerg-1260	178	16	in	in	ADP
fuelectenerg-1260	178	17	particular	particular	ADJ
fuelectenerg-1260	178	18	non	non	ADJ
fuelectenerg-1260	178	19	-	-	ADJ
fuelectenerg-1260	178	20	linear	linear	ADJ
fuelectenerg-1260	178	21	)	)	PUNCT
fuelectenerg-1260	178	22	and	and	CCONJ
fuelectenerg-1260	178	23	differential	differential	VERB
fuelectenerg-1260	178	24	algebraic	algebraic	ADJ
fuelectenerg-1260	178	25	equation	equation	NOUN
fuelectenerg-1260	178	26	systems	system	NOUN
fuelectenerg-1260	178	27	.	.	PUNCT
fuelectenerg-1260	179	1	greiner	greiner	PROPN
fuelectenerg-1260	179	2	et	et	PROPN
fuelectenerg-1260	179	3	al	al	PROPN
fuelectenerg-1260	179	4	.	.	PROPN
fuelectenerg-1260	179	5	have	have	AUX
fuelectenerg-1260	179	6	developed	develop	VERB
fuelectenerg-1260	179	7	a	a	DET
fuelectenerg-1260	179	8	method	method	NOUN
fuelectenerg-1260	179	9	to	to	PART
fuelectenerg-1260	179	10	reduce	reduce	VERB
fuelectenerg-1260	179	11	the	the	DET
fuelectenerg-1260	179	12	order	order	NOUN
fuelectenerg-1260	179	13	(	(	PUNCT
fuelectenerg-1260	179	14	dimension	dimension	NOUN
fuelectenerg-1260	179	15	)	)	PUNCT
fuelectenerg-1260	179	16	for	for	ADP
fuelectenerg-1260	179	17	finite	finite	ADJ
fuelectenerg-1260	179	18	element	element	NOUN
fuelectenerg-1260	179	19	models	model	NOUN
fuelectenerg-1260	179	20	of	of	ADP
fuelectenerg-1260	179	21	second	second	ADJ
fuelectenerg-1260	179	22	order	order	NOUN
fuelectenerg-1260	179	23	systems	system	NOUN
fuelectenerg-1260	179	24	,	,	PUNCT
fuelectenerg-1260	179	25	which	which	PRON
fuelectenerg-1260	179	26	appears	appear	VERB
fuelectenerg-1260	179	27	to	to	PART
fuelectenerg-1260	179	28	work	work	VERB
fuelectenerg-1260	179	29	well	well	ADV
fuelectenerg-1260	179	30	for	for	ADP
fuelectenerg-1260	179	31	linear	linear	ADJ
fuelectenerg-1260	179	32	conditions	condition	NOUN
fuelectenerg-1260	179	33	[	[	X
fuelectenerg-1260	179	34	32	32	NUM
fuelectenerg-1260	179	35	]	]	PUNCT
fuelectenerg-1260	179	36	.	.	PUNCT
fuelectenerg-1260	180	1	additional	additional	ADJ
fuelectenerg-1260	180	2	practice	practice	NOUN
fuelectenerg-1260	180	3	about	about	ADP
fuelectenerg-1260	180	4	numerical	numerical	ADJ
fuelectenerg-1260	180	5	and	and	CCONJ
fuelectenerg-1260	180	6	experimental	experimental	ADJ
fuelectenerg-1260	180	7	evaluation	evaluation	NOUN
fuelectenerg-1260	180	8	of	of	ADP
fuelectenerg-1260	180	9	the	the	DET
fuelectenerg-1260	180	10	mechanical	mechanical	ADJ
fuelectenerg-1260	180	11	properties	property	NOUN
fuelectenerg-1260	180	12	of	of	ADP
fuelectenerg-1260	180	13	mems	mem	NOUN
fuelectenerg-1260	180	14	and	and	CCONJ
fuelectenerg-1260	180	15	nems	nem	NOUN
fuelectenerg-1260	180	16	are	be	AUX
fuelectenerg-1260	180	17	collated	collate	VERB
fuelectenerg-1260	180	18	by	by	ADP
fuelectenerg-1260	180	19	frangi	frangi	PROPN
fuelectenerg-1260	180	20	et	et	PROPN
fuelectenerg-1260	180	21	al	al	PROPN
fuelectenerg-1260	180	22	.	.	PUNCT
fuelectenerg-1260	181	1	in	in	ADP
fuelectenerg-1260	181	2	[	[	X
fuelectenerg-1260	181	3	33	33	NUM
fuelectenerg-1260	181	4	]	]	PUNCT
fuelectenerg-1260	181	5	.	.	PUNCT
fuelectenerg-1260	182	1	it	it	PRON
fuelectenerg-1260	182	2	also	also	ADV
fuelectenerg-1260	182	3	contains	contain	VERB
fuelectenerg-1260	182	4	an	an	DET
fuelectenerg-1260	182	5	investigation	investigation	NOUN
fuelectenerg-1260	182	6	by	by	ADP
fuelectenerg-1260	182	7	ananthasuresh	ananthasuresh	NOUN
fuelectenerg-1260	182	8	about	about	ADP
fuelectenerg-1260	182	9	continuous	continuous	ADJ
fuelectenerg-1260	182	10	parameterization	parameterization	NOUN
fuelectenerg-1260	182	11	and	and	CCONJ
fuelectenerg-1260	182	12	the	the	DET
fuelectenerg-1260	182	13	problems	problem	NOUN
fuelectenerg-1260	182	14	that	that	PRON
fuelectenerg-1260	182	15	arise	arise	VERB
fuelectenerg-1260	182	16	and	and	CCONJ
fuelectenerg-1260	182	17	ways	way	NOUN
fuelectenerg-1260	182	18	for	for	ADP
fuelectenerg-1260	182	19	optimization	optimization	NOUN
fuelectenerg-1260	182	20	.	.	PUNCT
fuelectenerg-1260	183	1	bechthold	bechthold	VERB
fuelectenerg-1260	183	2	et	et	PROPN
fuelectenerg-1260	183	3	al	al	PROPN
fuelectenerg-1260	183	4	.	.	PROPN
fuelectenerg-1260	183	5	have	have	AUX
fuelectenerg-1260	183	6	developed	develop	VERB
fuelectenerg-1260	183	7	a	a	DET
fuelectenerg-1260	183	8	methodology	methodology	NOUN
fuelectenerg-1260	183	9	for	for	ADP
fuelectenerg-1260	183	10	model	model	NOUN
fuelectenerg-1260	183	11	order	order	NOUN
fuelectenerg-1260	183	12	reduction	reduction	NOUN
fuelectenerg-1260	183	13	for	for	ADP
fuelectenerg-1260	183	14	a	a	DET
fuelectenerg-1260	183	15	range	range	NOUN
fuelectenerg-1260	183	16	of	of	ADP
fuelectenerg-1260	183	17	mems	mem	NOUN
fuelectenerg-1260	183	18	[	[	X
fuelectenerg-1260	183	19	34	34	NUM
fuelectenerg-1260	183	20	]	]	PUNCT
fuelectenerg-1260	183	21	.	.	PUNCT
fuelectenerg-1260	184	1	their	their	PRON
fuelectenerg-1260	184	2	method	method	NOUN
fuelectenerg-1260	184	3	has	have	VERB
fuelectenerg-1260	184	4	the	the	DET
fuelectenerg-1260	184	5	potential	potential	NOUN
fuelectenerg-1260	184	6	for	for	ADP
fuelectenerg-1260	184	7	an	an	DET
fuelectenerg-1260	184	8	automated	automate	VERB
fuelectenerg-1260	184	9	implementation	implementation	NOUN
fuelectenerg-1260	184	10	.	.	PUNCT
fuelectenerg-1260	185	1	mems	mem	NOUN
fuelectenerg-1260	185	2	involving	involve	VERB
fuelectenerg-1260	185	3	fluids	fluid	NOUN
fuelectenerg-1260	185	4	have	have	VERB
fuelectenerg-1260	185	5	a	a	DET
fuelectenerg-1260	185	6	substantial	substantial	ADJ
fuelectenerg-1260	185	7	impact	impact	NOUN
fuelectenerg-1260	185	8	in	in	ADP
fuelectenerg-1260	185	9	medical	medical	ADJ
fuelectenerg-1260	185	10	applications	application	NOUN
fuelectenerg-1260	185	11	.	.	PUNCT
fuelectenerg-1260	186	1	fluids	fluid	NOUN
fuelectenerg-1260	186	2	play	play	VERB
fuelectenerg-1260	186	3	a	a	DET
fuelectenerg-1260	186	4	special	special	ADJ
fuelectenerg-1260	186	5	role	role	NOUN
fuelectenerg-1260	186	6	in	in	ADP
fuelectenerg-1260	186	7	many	many	ADJ
fuelectenerg-1260	186	8	microsystems	microsystem	NOUN
fuelectenerg-1260	186	9	because	because	SCONJ
fuelectenerg-1260	186	10	fluids	fluid	NOUN
fuelectenerg-1260	186	11	behave	behave	VERB
fuelectenerg-1260	186	12	differently	differently	ADV
fuelectenerg-1260	186	13	in	in	ADP
fuelectenerg-1260	186	14	a	a	DET
fuelectenerg-1260	186	15	microchannel	microchannel	NOUN
fuelectenerg-1260	186	16	than	than	ADP
fuelectenerg-1260	186	17	in	in	ADP
fuelectenerg-1260	186	18	a	a	DET
fuelectenerg-1260	186	19	macroscopic	macroscopic	ADJ
fuelectenerg-1260	186	20	space	space	NOUN
fuelectenerg-1260	186	21	.	.	PUNCT
fuelectenerg-1260	187	1	design	design	NOUN
fuelectenerg-1260	187	2	considerations	consideration	NOUN
fuelectenerg-1260	187	3	and	and	CCONJ
fuelectenerg-1260	187	4	microfluidic	microfluidic	ADJ
fuelectenerg-1260	187	5	behaviour	behaviour	NOUN
fuelectenerg-1260	187	6	requires	require	VERB
fuelectenerg-1260	187	7	special	special	ADJ
fuelectenerg-1260	187	8	mathematical	mathematical	ADJ
fuelectenerg-1260	187	9	and	and	CCONJ
fuelectenerg-1260	187	10	modelling	modelling	NOUN
fuelectenerg-1260	187	11	skills	skill	NOUN
fuelectenerg-1260	187	12	in	in	ADP
fuelectenerg-1260	187	13	a	a	DET
fuelectenerg-1260	187	14	different	different	ADJ
fuelectenerg-1260	187	15	physical	physical	ADJ
fuelectenerg-1260	187	16	domain	domain	NOUN
fuelectenerg-1260	187	17	.	.	PUNCT
fuelectenerg-1260	188	1	nguyen	nguyen	NOUN
fuelectenerg-1260	188	2	and	and	CCONJ
fuelectenerg-1260	188	3	wereley	wereley	ADV
fuelectenerg-1260	188	4	provide	provide	VERB
fuelectenerg-1260	188	5	a	a	DET
fuelectenerg-1260	188	6	good	good	ADJ
fuelectenerg-1260	188	7	introduction	introduction	NOUN
fuelectenerg-1260	188	8	into	into	ADP
fuelectenerg-1260	188	9	this	this	DET
fuelectenerg-1260	188	10	domain	domain	NOUN
fuelectenerg-1260	188	11	and	and	CCONJ
fuelectenerg-1260	188	12	microfluidics	microfluidic	NOUN
fuelectenerg-1260	188	13	in	in	ADP
fuelectenerg-1260	188	14	mems	mem	NOUN
fuelectenerg-1260	188	15	[	[	X
fuelectenerg-1260	188	16	35	35	NUM
fuelectenerg-1260	188	17	]	]	SYM
fuelectenerg-1260	188	18	.	.	PUNCT
fuelectenerg-1260	189	1	3.1	3.1	NUM
fuelectenerg-1260	189	2	.	.	PUNCT
fuelectenerg-1260	189	3	reliability	reliability	NOUN
fuelectenerg-1260	189	4	reliability	reliability	NOUN
fuelectenerg-1260	189	5	is	be	AUX
fuelectenerg-1260	189	6	defined	define	VERB
fuelectenerg-1260	189	7	as	as	ADP
fuelectenerg-1260	189	8	the	the	DET
fuelectenerg-1260	189	9	time	time	NOUN
fuelectenerg-1260	189	10	before	before	ADP
fuelectenerg-1260	189	11	failure	failure	NOUN
fuelectenerg-1260	189	12	.	.	PUNCT
fuelectenerg-1260	190	1	this	this	DET
fuelectenerg-1260	190	2	quantity	quantity	NOUN
fuelectenerg-1260	190	3	has	have	AUX
fuelectenerg-1260	190	4	been	be	AUX
fuelectenerg-1260	190	5	used	use	VERB
fuelectenerg-1260	190	6	for	for	ADP
fuelectenerg-1260	190	7	decades	decade	NOUN
fuelectenerg-1260	190	8	,	,	PUNCT
fuelectenerg-1260	190	9	but	but	CCONJ
fuelectenerg-1260	190	10	on	on	ADP
fuelectenerg-1260	190	11	closer	close	ADJ
fuelectenerg-1260	190	12	observation	observation	NOUN
fuelectenerg-1260	190	13	,	,	PUNCT
fuelectenerg-1260	190	14	it	it	PRON
fuelectenerg-1260	190	15	does	do	AUX
fuelectenerg-1260	190	16	not	not	PART
fuelectenerg-1260	190	17	give	give	VERB
fuelectenerg-1260	190	18	any	any	DET
fuelectenerg-1260	190	19	indication	indication	NOUN
fuelectenerg-1260	190	20	why	why	SCONJ
fuelectenerg-1260	190	21	the	the	DET
fuelectenerg-1260	190	22	device	device	NOUN
fuelectenerg-1260	190	23	fails	fail	VERB
fuelectenerg-1260	190	24	.	.	PUNCT
fuelectenerg-1260	191	1	this	this	PRON
fuelectenerg-1260	191	2	is	be	AUX
fuelectenerg-1260	191	3	aggravated	aggravate	VERB
fuelectenerg-1260	191	4	in	in	ADP
fuelectenerg-1260	191	5	mems	mem	NOUN
fuelectenerg-1260	191	6	;	;	PUNCT
fuelectenerg-1260	191	7	they	they	PRON
fuelectenerg-1260	191	8	are	be	AUX
fuelectenerg-1260	191	9	not	not	PART
fuelectenerg-1260	191	10	just	just	ADV
fuelectenerg-1260	191	11	the	the	DET
fuelectenerg-1260	191	12	microelectrical	microelectrical	ADJ
fuelectenerg-1260	191	13	circuitry	circuitry	NOUN
fuelectenerg-1260	191	14	but	but	CCONJ
fuelectenerg-1260	191	15	also	also	ADV
fuelectenerg-1260	191	16	the	the	DET
fuelectenerg-1260	191	17	mechanical	mechanical	ADJ
fuelectenerg-1260	191	18	part	part	NOUN
fuelectenerg-1260	191	19	that	that	PRON
fuelectenerg-1260	191	20	goes	go	VERB
fuelectenerg-1260	191	21	with	with	ADP
fuelectenerg-1260	191	22	it	it	PRON
fuelectenerg-1260	191	23	.	.	PUNCT
fuelectenerg-1260	192	1	microscopic	microscopic	ADJ
fuelectenerg-1260	192	2	structures	structure	NOUN
fuelectenerg-1260	192	3	will	will	AUX
fuelectenerg-1260	192	4	function	function	VERB
fuelectenerg-1260	192	5	in	in	ADP
fuelectenerg-1260	192	6	different	different	ADJ
fuelectenerg-1260	192	7	physical	physical	ADJ
fuelectenerg-1260	192	8	domains	domain	NOUN
fuelectenerg-1260	192	9	than	than	ADP
fuelectenerg-1260	192	10	macroscopic	macroscopic	ADJ
fuelectenerg-1260	192	11	devices	device	NOUN
fuelectenerg-1260	192	12	.	.	PUNCT
fuelectenerg-1260	193	1	it	it	PRON
fuelectenerg-1260	193	2	may	may	AUX
fuelectenerg-1260	193	3	not	not	PART
fuelectenerg-1260	193	4	be	be	AUX
fuelectenerg-1260	193	5	easy	easy	ADJ
fuelectenerg-1260	193	6	to	to	PART
fuelectenerg-1260	193	7	pinpoint	pinpoint	VERB
fuelectenerg-1260	193	8	the	the	DET
fuelectenerg-1260	193	9	source	source	NOUN
fuelectenerg-1260	193	10	of	of	ADP
fuelectenerg-1260	193	11	functional	functional	ADJ
fuelectenerg-1260	193	12	failures	failure	NOUN
fuelectenerg-1260	193	13	because	because	SCONJ
fuelectenerg-1260	193	14	the	the	DET
fuelectenerg-1260	193	15	dominant	dominant	ADJ
fuelectenerg-1260	193	16	physical	physical	ADJ
fuelectenerg-1260	193	17	forces	force	NOUN
fuelectenerg-1260	193	18	change	change	VERB
fuelectenerg-1260	193	19	gradually	gradually	ADV
fuelectenerg-1260	193	20	as	as	SCONJ
fuelectenerg-1260	193	21	their	their	PRON
fuelectenerg-1260	193	22	geometric	geometric	ADJ
fuelectenerg-1260	193	23	dimensions	dimension	NOUN
fuelectenerg-1260	193	24	increase	increase	NOUN
fuelectenerg-1260	193	25	or	or	CCONJ
fuelectenerg-1260	193	26	decrease	decrease	NOUN
fuelectenerg-1260	193	27	.	.	PUNCT
fuelectenerg-1260	194	1	because	because	SCONJ
fuelectenerg-1260	194	2	it	it	PRON
fuelectenerg-1260	194	3	is	be	AUX
fuelectenerg-1260	194	4	a	a	DET
fuelectenerg-1260	194	5	gradual	gradual	ADJ
fuelectenerg-1260	194	6	change	change	NOUN
fuelectenerg-1260	194	7	,	,	PUNCT
fuelectenerg-1260	194	8	it	it	PRON
fuelectenerg-1260	194	9	may	may	AUX
fuelectenerg-1260	194	10	not	not	PART
fuelectenerg-1260	194	11	be	be	AUX
fuelectenerg-1260	194	12	evident	evident	ADJ
fuelectenerg-1260	194	13	how	how	SCONJ
fuelectenerg-1260	194	14	much	much	ADJ
fuelectenerg-1260	194	15	is	be	AUX
fuelectenerg-1260	194	16	due	due	ADJ
fuelectenerg-1260	194	17	to	to	PART
fuelectenerg-1260	194	18	say	say	VERB
fuelectenerg-1260	194	19	adhesion	adhesion	NOUN
fuelectenerg-1260	194	20	,	,	PUNCT
fuelectenerg-1260	194	21	capillarity	capillarity	NOUN
fuelectenerg-1260	194	22	,	,	PUNCT
fuelectenerg-1260	194	23	or	or	CCONJ
fuelectenerg-1260	194	24	any	any	DET
fuelectenerg-1260	194	25	other	other	ADJ
fuelectenerg-1260	194	26	force	force	NOUN
fuelectenerg-1260	194	27	,	,	PUNCT
fuelectenerg-1260	194	28	it	it	PRON
fuelectenerg-1260	194	29	is	be	AUX
fuelectenerg-1260	194	30	appropriate	appropriate	ADJ
fuelectenerg-1260	194	31	to	to	PART
fuelectenerg-1260	194	32	consider	consider	VERB
fuelectenerg-1260	194	33	a	a	DET
fuelectenerg-1260	194	34	more	more	ADV
fuelectenerg-1260	194	35	structured	structured	ADJ
fuelectenerg-1260	194	36	approach	approach	NOUN
fuelectenerg-1260	194	37	.	.	PUNCT
fuelectenerg-1260	195	1	to	to	PART
fuelectenerg-1260	195	2	address	address	VERB
fuelectenerg-1260	195	3	this	this	DET
fuelectenerg-1260	195	4	issue	issue	NOUN
fuelectenerg-1260	195	5	,	,	PUNCT
fuelectenerg-1260	195	6	we	we	PRON
fuelectenerg-1260	195	7	have	have	AUX
fuelectenerg-1260	195	8	developed	develop	VERB
fuelectenerg-1260	195	9	a	a	DET
fuelectenerg-1260	195	10	hierarchically	hierarchically	ADV
fuelectenerg-1260	195	11	structured	structured	ADJ
fuelectenerg-1260	195	12	reliability	reliability	NOUN
fuelectenerg-1260	195	13	model	model	NOUN
fuelectenerg-1260	195	14	that	that	PRON
fuelectenerg-1260	195	15	allows	allow	VERB
fuelectenerg-1260	195	16	giving	give	VERB
fuelectenerg-1260	195	17	different	different	ADJ
fuelectenerg-1260	195	18	failure	failure	NOUN
fuelectenerg-1260	195	19	weights	weight	NOUN
fuelectenerg-1260	195	20	to	to	ADP
fuelectenerg-1260	195	21	different	different	ADJ
fuelectenerg-1260	195	22	components	component	NOUN
fuelectenerg-1260	195	23	.	.	PUNCT
fuelectenerg-1260	196	1	some	some	DET
fuelectenerg-1260	196	2	components	component	NOUN
fuelectenerg-1260	196	3	are	be	AUX
fuelectenerg-1260	196	4	more	more	ADV
fuelectenerg-1260	196	5	robust	robust	ADJ
fuelectenerg-1260	196	6	(	(	PUNCT
fuelectenerg-1260	196	7	or	or	CCONJ
fuelectenerg-1260	196	8	vulnerable	vulnerable	ADJ
fuelectenerg-1260	196	9	)	)	PUNCT
fuelectenerg-1260	196	10	in	in	ADP
fuelectenerg-1260	196	11	their	their	PRON
fuelectenerg-1260	196	12	design	design	NOUN
fuelectenerg-1260	196	13	than	than	ADP
fuelectenerg-1260	196	14	others	other	NOUN
fuelectenerg-1260	196	15	.	.	PUNCT
fuelectenerg-1260	197	1	likewise	likewise	ADV
fuelectenerg-1260	197	2	,	,	PUNCT
fuelectenerg-1260	197	3	some	some	DET
fuelectenerg-1260	197	4	materials	material	NOUN
fuelectenerg-1260	197	5	are	be	AUX
fuelectenerg-1260	197	6	more	more	ADV
fuelectenerg-1260	197	7	robust	robust	ADJ
fuelectenerg-1260	197	8	(	(	PUNCT
fuelectenerg-1260	197	9	or	or	CCONJ
fuelectenerg-1260	197	10	vulnerable	vulnerable	ADJ
fuelectenerg-1260	197	11	)	)	PUNCT
fuelectenerg-1260	197	12	than	than	ADP
fuelectenerg-1260	197	13	others	other	NOUN
fuelectenerg-1260	197	14	;	;	PUNCT
fuelectenerg-1260	197	15	and	and	CCONJ
fuelectenerg-1260	197	16	again	again	ADV
fuelectenerg-1260	197	17	,	,	PUNCT
fuelectenerg-1260	197	18	some	some	DET
fuelectenerg-1260	197	19	assembly	assembly	NOUN
fuelectenerg-1260	197	20	or	or	CCONJ
fuelectenerg-1260	197	21	manufacturing	manufacturing	NOUN
fuelectenerg-1260	197	22	processes	process	NOUN
fuelectenerg-1260	197	23	are	be	AUX
fuelectenerg-1260	197	24	more	more	ADV
fuelectenerg-1260	197	25	difficult	difficult	ADJ
fuelectenerg-1260	197	26	(	(	PUNCT
fuelectenerg-1260	197	27	vulnerable	vulnerable	ADJ
fuelectenerg-1260	197	28	)	)	PUNCT
fuelectenerg-1260	197	29	than	than	ADP
fuelectenerg-1260	197	30	others	other	NOUN
fuelectenerg-1260	197	31	.	.	PUNCT
fuelectenerg-1260	198	1	our	our	PRON
fuelectenerg-1260	198	2	model	model	NOUN
fuelectenerg-1260	198	3	allows	allow	VERB
fuelectenerg-1260	198	4	assessing	assess	VERB
fuelectenerg-1260	198	5	and	and	CCONJ
fuelectenerg-1260	198	6	pondering	ponder	VERB
fuelectenerg-1260	198	7	a	a	DET
fuelectenerg-1260	198	8	priori	priori	ADV
fuelectenerg-1260	198	9	different	different	ADJ
fuelectenerg-1260	198	10	combinations	combination	NOUN
fuelectenerg-1260	198	11	of	of	ADP
fuelectenerg-1260	198	12	options	option	NOUN
fuelectenerg-1260	198	13	for	for	ADP
fuelectenerg-1260	198	14	design	design	NOUN
fuelectenerg-1260	198	15	,	,	PUNCT
fuelectenerg-1260	198	16	materials	material	NOUN
fuelectenerg-1260	198	17	and	and	CCONJ
fuelectenerg-1260	198	18	manufacture	manufacture	NOUN
fuelectenerg-1260	198	19	or	or	CCONJ
fuelectenerg-1260	198	20	assembly	assembly	NOUN
fuelectenerg-1260	198	21	[	[	X
fuelectenerg-1260	198	22	36	36	NUM
fuelectenerg-1260	198	23	]	]	PUNCT
fuelectenerg-1260	198	24	.	.	PUNCT
fuelectenerg-1260	199	1	in	in	ADP
fuelectenerg-1260	199	2	a	a	DET
fuelectenerg-1260	199	3	somewhat	somewhat	ADV
fuelectenerg-1260	199	4	similar	similar	ADJ
fuelectenerg-1260	199	5	way	way	NOUN
fuelectenerg-1260	199	6	,	,	PUNCT
fuelectenerg-1260	199	7	muratet	muratet	NOUN
fuelectenerg-1260	199	8	et	et	PROPN
fuelectenerg-1260	199	9	al	al	PROPN
fuelectenerg-1260	199	10	.	.	PROPN
fuelectenerg-1260	199	11	have	have	AUX
fuelectenerg-1260	199	12	focused	focus	VERB
fuelectenerg-1260	199	13	on	on	ADP
fuelectenerg-1260	199	14	failure	failure	NOUN
fuelectenerg-1260	199	15	analysis	analysis	NOUN
fuelectenerg-1260	199	16	given	give	VERB
fuelectenerg-1260	199	17	that	that	SCONJ
fuelectenerg-1260	199	18	the	the	DET
fuelectenerg-1260	199	19	vast	vast	ADJ
fuelectenerg-1260	199	20	variety	variety	NOUN
fuelectenerg-1260	199	21	of	of	ADP
fuelectenerg-1260	199	22	structures	structure	NOUN
fuelectenerg-1260	199	23	in	in	ADP
fuelectenerg-1260	199	24	mems	mem	NOUN
fuelectenerg-1260	199	25	represent	represent	VERB
fuelectenerg-1260	199	26	different	different	ADJ
fuelectenerg-1260	199	27	points	point	NOUN
fuelectenerg-1260	199	28	of	of	ADP
fuelectenerg-1260	199	29	material	material	ADJ
fuelectenerg-1260	199	30	weakness	weakness	NOUN
fuelectenerg-1260	199	31	and/or	and/or	CCONJ
fuelectenerg-1260	199	32	design	design	NOUN
fuelectenerg-1260	199	33	failure	failure	NOUN
fuelectenerg-1260	199	34	.	.	PUNCT
fuelectenerg-1260	200	1	to	to	PART
fuelectenerg-1260	200	2	demonstrate	demonstrate	VERB
fuelectenerg-1260	200	3	this	this	PRON
fuelectenerg-1260	200	4	,	,	PUNCT
fuelectenerg-1260	200	5	they	they	PRON
fuelectenerg-1260	200	6	have	have	AUX
fuelectenerg-1260	200	7	developed	develop	VERB
fuelectenerg-1260	200	8	a	a	DET
fuelectenerg-1260	200	9	time	time	NOUN
fuelectenerg-1260	200	10	before	before	ADP
fuelectenerg-1260	200	11	failure	failure	NOUN
fuelectenerg-1260	200	12	prediction	prediction	NOUN
fuelectenerg-1260	200	13	model	model	NOUN
fuelectenerg-1260	200	14	and	and	CCONJ
fuelectenerg-1260	200	15	illustrated	illustrate	VERB
fuelectenerg-1260	200	16	the	the	DET
fuelectenerg-1260	200	17	procedure	procedure	NOUN
fuelectenerg-1260	200	18	by	by	ADP
fuelectenerg-1260	200	19	implementing	implement	VERB
fuelectenerg-1260	200	20	a	a	DET
fuelectenerg-1260	200	21	wobble	wobble	ADJ
fuelectenerg-1260	200	22	electrostatic	electrostatic	ADJ
fuelectenerg-1260	200	23	micromotor	micromotor	NOUN
fuelectenerg-1260	200	24	as	as	ADP
fuelectenerg-1260	200	25	an	an	DET
fuelectenerg-1260	200	26	example	example	NOUN
fuelectenerg-1260	200	27	.	.	PUNCT
fuelectenerg-1260	201	1	they	they	PRON
fuelectenerg-1260	201	2	use	use	VERB
fuelectenerg-1260	201	3	testing	testing	NOUN
fuelectenerg-1260	201	4	failure	failure	NOUN
fuelectenerg-1260	201	5	(	(	PUNCT
fuelectenerg-1260	201	6	including	include	VERB
fuelectenerg-1260	201	7	failure	failure	NOUN
fuelectenerg-1260	201	8	criteria	criterion	NOUN
fuelectenerg-1260	201	9	and	and	CCONJ
fuelectenerg-1260	201	10	conditions	condition	NOUN
fuelectenerg-1260	201	11	)	)	PUNCT
fuelectenerg-1260	201	12	and	and	CCONJ
fuelectenerg-1260	201	13	combine	combine	VERB
fuelectenerg-1260	201	14	these	these	DET
fuelectenerg-1260	201	15	observations	observation	NOUN
fuelectenerg-1260	201	16	with	with	ADP
fuelectenerg-1260	201	17	fea	fea	PROPN
fuelectenerg-1260	201	18	simulations	simulation	NOUN
fuelectenerg-1260	201	19	(	(	PUNCT
fuelectenerg-1260	201	20	by	by	ADP
fuelectenerg-1260	201	21	including	include	VERB
fuelectenerg-1260	201	22	failures	failure	NOUN
fuelectenerg-1260	201	23	into	into	ADP
fuelectenerg-1260	201	24	the	the	DET
fuelectenerg-1260	201	25	simulations	simulation	NOUN
fuelectenerg-1260	201	26	)	)	PUNCT
fuelectenerg-1260	201	27	from	from	ADP
fuelectenerg-1260	201	28	which	which	PRON
fuelectenerg-1260	201	29	they	they	PRON
fuelectenerg-1260	201	30	can	can	AUX
fuelectenerg-1260	201	31	identify	identify	VERB
fuelectenerg-1260	201	32	risk	risk	NOUN
fuelectenerg-1260	201	33	conditions	condition	NOUN
fuelectenerg-1260	201	34	(	(	PUNCT
fuelectenerg-1260	201	35	deformation	deformation	NOUN
fuelectenerg-1260	201	36	,	,	PUNCT
fuelectenerg-1260	201	37	stress	stress	NOUN
fuelectenerg-1260	201	38	)	)	PUNCT
fuelectenerg-1260	201	39	from	from	ADP
fuelectenerg-1260	201	40	which	which	PRON
fuelectenerg-1260	201	41	they	they	PRON
fuelectenerg-1260	201	42	derive	derive	VERB
fuelectenerg-1260	201	43	the	the	DET
fuelectenerg-1260	201	44	time	time	NOUN
fuelectenerg-1260	201	45	before	before	ADP
fuelectenerg-1260	201	46	failure	failure	NOUN
fuelectenerg-1260	201	47	model	model	NOUN
fuelectenerg-1260	201	48	[	[	X
fuelectenerg-1260	201	49	37	37	NUM
fuelectenerg-1260	201	50	]	]	SYM
fuelectenerg-1260	201	51	.	.	PUNCT
fuelectenerg-1260	202	1	3.2	3.2	NUM
fuelectenerg-1260	202	2	.	.	PUNCT
fuelectenerg-1260	203	1	cad	cad	NOUN
fuelectenerg-1260	203	2	systems	system	NOUN
fuelectenerg-1260	203	3	in	in	ADP
fuelectenerg-1260	203	4	the	the	DET
fuelectenerg-1260	203	5	early	early	ADJ
fuelectenerg-1260	203	6	days	day	NOUN
fuelectenerg-1260	203	7	,	,	PUNCT
fuelectenerg-1260	203	8	a	a	DET
fuelectenerg-1260	203	9	relatively	relatively	ADV
fuelectenerg-1260	203	10	small	small	ADJ
fuelectenerg-1260	203	11	number	number	NOUN
fuelectenerg-1260	203	12	of	of	ADP
fuelectenerg-1260	203	13	mems	mem	NOUN
fuelectenerg-1260	203	14	design	design	NOUN
fuelectenerg-1260	203	15	software	software	NOUN
fuelectenerg-1260	203	16	environments	environment	NOUN
fuelectenerg-1260	203	17	were	be	AUX
fuelectenerg-1260	203	18	available	available	ADJ
fuelectenerg-1260	203	19	on	on	ADP
fuelectenerg-1260	203	20	the	the	DET
fuelectenerg-1260	203	21	market	market	NOUN
fuelectenerg-1260	203	22	.	.	PUNCT
fuelectenerg-1260	204	1	their	their	PRON
fuelectenerg-1260	204	2	application	application	NOUN
fuelectenerg-1260	204	3	potential	potential	NOUN
fuelectenerg-1260	204	4	was	be	AUX
fuelectenerg-1260	204	5	rather	rather	ADV
fuelectenerg-1260	204	6	restricted	restrict	VERB
fuelectenerg-1260	204	7	to	to	ADP
fuelectenerg-1260	204	8	18	18	NUM
fuelectenerg-1260	204	9	r.	r.	PROPN
fuelectenerg-1260	204	10	sitte	sitte	PROPN
fuelectenerg-1260	204	11	modifications	modification	NOUN
fuelectenerg-1260	204	12	of	of	ADP
fuelectenerg-1260	204	13	existing	exist	VERB
fuelectenerg-1260	204	14	library	library	NOUN
fuelectenerg-1260	204	15	designs	design	NOUN
fuelectenerg-1260	204	16	.	.	PUNCT
fuelectenerg-1260	205	1	dewey	dewey	PROPN
fuelectenerg-1260	205	2	et	et	PROPN
fuelectenerg-1260	205	3	al	al	PROPN
fuelectenerg-1260	205	4	.	.	PROPN
fuelectenerg-1260	205	5	used	use	VERB
fuelectenerg-1260	205	6	analog	analog	NOUN
fuelectenerg-1260	205	7	hardware	hardware	NOUN
fuelectenerg-1260	205	8	description	description	NOUN
fuelectenerg-1260	205	9	languages	language	NOUN
fuelectenerg-1260	205	10	(	(	PUNCT
fuelectenerg-1260	205	11	vhdl	vhdl	NOUN
fuelectenerg-1260	205	12	-	-	PUNCT
fuelectenerg-1260	205	13	ams	ams	PROPN
fuelectenerg-1260	205	14	)	)	PUNCT
fuelectenerg-1260	205	15	for	for	ADP
fuelectenerg-1260	205	16	their	their	PRON
fuelectenerg-1260	205	17	project	project	NOUN
fuelectenerg-1260	205	18	visual	visual	ADJ
fuelectenerg-1260	205	19	integrated	integrate	VERB
fuelectenerg-1260	205	20	-	-	PUNCT
fuelectenerg-1260	205	21	microelectromechanical	microelectromechanical	ADJ
fuelectenerg-1260	205	22	vhdl	vhdl	PROPN
fuelectenerg-1260	205	23	-	-	PUNCT
fuelectenerg-1260	205	24	ams	ams	PROPN
fuelectenerg-1260	205	25	interactive	interactive	ADJ
fuelectenerg-1260	205	26	design	design	NOUN
fuelectenerg-1260	205	27	(	(	PUNCT
fuelectenerg-1260	205	28	vivid	vivid	NOUN
fuelectenerg-1260	205	29	)	)	PUNCT
fuelectenerg-1260	206	1	[	[	X
fuelectenerg-1260	206	2	38	38	NUM
fuelectenerg-1260	206	3	]	]	PUNCT
fuelectenerg-1260	206	4	.	.	PUNCT
fuelectenerg-1260	207	1	often	often	ADV
fuelectenerg-1260	207	2	the	the	DET
fuelectenerg-1260	207	3	tools	tool	NOUN
fuelectenerg-1260	207	4	were	be	AUX
fuelectenerg-1260	207	5	by	by	ADP
fuelectenerg-1260	207	6	-	-	PUNCT
fuelectenerg-1260	207	7	products	product	NOUN
fuelectenerg-1260	207	8	from	from	ADP
fuelectenerg-1260	207	9	code	code	NOUN
fuelectenerg-1260	207	10	written	write	VERB
fuelectenerg-1260	207	11	for	for	ADP
fuelectenerg-1260	207	12	the	the	DET
fuelectenerg-1260	207	13	design	design	NOUN
fuelectenerg-1260	207	14	of	of	ADP
fuelectenerg-1260	207	15	another	another	DET
fuelectenerg-1260	207	16	specific	specific	ADJ
fuelectenerg-1260	207	17	project	project	NOUN
fuelectenerg-1260	207	18	[	[	X
fuelectenerg-1260	207	19	39,40	39,40	NUM
fuelectenerg-1260	207	20	]	]	PUNCT
fuelectenerg-1260	207	21	and	and	CCONJ
fuelectenerg-1260	207	22	often	often	ADV
fuelectenerg-1260	207	23	difficult	difficult	ADJ
fuelectenerg-1260	207	24	to	to	PART
fuelectenerg-1260	207	25	use	use	VERB
fuelectenerg-1260	207	26	[	[	X
fuelectenerg-1260	207	27	41	41	NUM
fuelectenerg-1260	207	28	]	]	PUNCT
fuelectenerg-1260	207	29	.	.	PUNCT
fuelectenerg-1260	208	1	they	they	PRON
fuelectenerg-1260	208	2	appear	appear	VERB
fuelectenerg-1260	208	3	as	as	ADP
fuelectenerg-1260	208	4	a	a	DET
fuelectenerg-1260	208	5	collection	collection	NOUN
fuelectenerg-1260	208	6	of	of	ADP
fuelectenerg-1260	208	7	tools	tool	NOUN
fuelectenerg-1260	208	8	[	[	X
fuelectenerg-1260	208	9	42	42	NUM
fuelectenerg-1260	208	10	]	]	PUNCT
fuelectenerg-1260	208	11	,	,	PUNCT
fuelectenerg-1260	208	12	sometimes	sometimes	ADV
fuelectenerg-1260	208	13	limited	limit	VERB
fuelectenerg-1260	208	14	to	to	ADP
fuelectenerg-1260	208	15	specific	specific	ADJ
fuelectenerg-1260	208	16	applications	application	NOUN
fuelectenerg-1260	208	17	[	[	X
fuelectenerg-1260	208	18	43	43	NUM
fuelectenerg-1260	208	19	]	]	PUNCT
fuelectenerg-1260	208	20	.	.	PUNCT
fuelectenerg-1260	209	1	one	one	NUM
fuelectenerg-1260	209	2	of	of	ADP
fuelectenerg-1260	209	3	the	the	DET
fuelectenerg-1260	209	4	first	first	ADJ
fuelectenerg-1260	209	5	cad	cad	PROPN
fuelectenerg-1260	209	6	systems	system	NOUN
fuelectenerg-1260	209	7	for	for	ADP
fuelectenerg-1260	209	8	mems	mem	NOUN
fuelectenerg-1260	209	9	was	be	AUX
fuelectenerg-1260	209	10	memcad	memcad	ADJ
fuelectenerg-1260	209	11	built	build	VERB
fuelectenerg-1260	209	12	at	at	ADP
fuelectenerg-1260	209	13	mit	mit	NOUN
fuelectenerg-1260	209	14	in	in	ADP
fuelectenerg-1260	209	15	the	the	DET
fuelectenerg-1260	209	16	late	late	ADJ
fuelectenerg-1260	209	17	nineties	ninety	NOUN
fuelectenerg-1260	209	18	[	[	X
fuelectenerg-1260	209	19	44	44	NUM
fuelectenerg-1260	209	20	]	]	PUNCT
fuelectenerg-1260	209	21	.	.	PUNCT
fuelectenerg-1260	210	1	since	since	SCONJ
fuelectenerg-1260	210	2	then	then	ADV
fuelectenerg-1260	210	3	many	many	ADJ
fuelectenerg-1260	210	4	more	more	ADJ
fuelectenerg-1260	210	5	systems	system	NOUN
fuelectenerg-1260	210	6	have	have	AUX
fuelectenerg-1260	210	7	been	be	AUX
fuelectenerg-1260	210	8	brought	bring	VERB
fuelectenerg-1260	210	9	to	to	ADP
fuelectenerg-1260	210	10	the	the	DET
fuelectenerg-1260	210	11	market	market	NOUN
fuelectenerg-1260	210	12	,	,	PUNCT
fuelectenerg-1260	210	13	some	some	PRON
fuelectenerg-1260	210	14	of	of	ADP
fuelectenerg-1260	210	15	them	they	PRON
fuelectenerg-1260	210	16	disappeared	disappear	VERB
fuelectenerg-1260	210	17	,	,	PUNCT
fuelectenerg-1260	210	18	while	while	SCONJ
fuelectenerg-1260	210	19	other	other	ADJ
fuelectenerg-1260	210	20	evolved	evolve	VERB
fuelectenerg-1260	210	21	with	with	ADP
fuelectenerg-1260	210	22	state	state	NOUN
fuelectenerg-1260	210	23	of	of	ADP
fuelectenerg-1260	210	24	the	the	DET
fuelectenerg-1260	210	25	art	art	NOUN
fuelectenerg-1260	210	26	facilities	facility	NOUN
fuelectenerg-1260	210	27	.	.	PUNCT
fuelectenerg-1260	211	1	few	few	ADJ
fuelectenerg-1260	211	2	have	have	AUX
fuelectenerg-1260	211	3	calculating	calculate	VERB
fuelectenerg-1260	211	4	mems	mem	NOUN
fuelectenerg-1260	211	5	manufacturing	manufacturing	NOUN
fuelectenerg-1260	211	6	parameters	parameter	NOUN
fuelectenerg-1260	211	7	as	as	ADP
fuelectenerg-1260	211	8	their	their	PRON
fuelectenerg-1260	211	9	primary	primary	ADJ
fuelectenerg-1260	211	10	purpose	purpose	NOUN
fuelectenerg-1260	211	11	,	,	PUNCT
fuelectenerg-1260	211	12	and	and	CCONJ
fuelectenerg-1260	211	13	if	if	SCONJ
fuelectenerg-1260	211	14	so	so	ADV
fuelectenerg-1260	211	15	,	,	PUNCT
fuelectenerg-1260	211	16	more	more	ADV
fuelectenerg-1260	211	17	often	often	ADV
fuelectenerg-1260	211	18	than	than	ADP
fuelectenerg-1260	211	19	not	not	PART
fuelectenerg-1260	211	20	,	,	PUNCT
fuelectenerg-1260	211	21	they	they	PRON
fuelectenerg-1260	211	22	are	be	AUX
fuelectenerg-1260	211	23	beyond	beyond	ADP
fuelectenerg-1260	211	24	reach	reach	NOUN
fuelectenerg-1260	211	25	researchers	researcher	NOUN
fuelectenerg-1260	211	26	due	due	ADJ
fuelectenerg-1260	211	27	to	to	ADP
fuelectenerg-1260	211	28	their	their	PRON
fuelectenerg-1260	211	29	high	high	ADJ
fuelectenerg-1260	211	30	cost	cost	NOUN
fuelectenerg-1260	212	1	[	[	X
fuelectenerg-1260	212	2	45	45	NUM
fuelectenerg-1260	212	3	,	,	PUNCT
fuelectenerg-1260	212	4	46	46	NUM
fuelectenerg-1260	212	5	]	]	PUNCT
fuelectenerg-1260	212	6	.	.	PUNCT
fuelectenerg-1260	213	1	due	due	ADP
fuelectenerg-1260	213	2	to	to	ADP
fuelectenerg-1260	213	3	the	the	DET
fuelectenerg-1260	213	4	amount	amount	NOUN
fuelectenerg-1260	213	5	of	of	ADP
fuelectenerg-1260	213	6	calculations	calculation	NOUN
fuelectenerg-1260	213	7	involved	involve	VERB
fuelectenerg-1260	213	8	,	,	PUNCT
fuelectenerg-1260	213	9	the	the	DET
fuelectenerg-1260	213	10	development	development	NOUN
fuelectenerg-1260	213	11	of	of	ADP
fuelectenerg-1260	213	12	a	a	DET
fuelectenerg-1260	213	13	cad	cad	NOUN
fuelectenerg-1260	213	14	tool	tool	NOUN
fuelectenerg-1260	213	15	is	be	AUX
fuelectenerg-1260	213	16	not	not	PART
fuelectenerg-1260	213	17	an	an	DET
fuelectenerg-1260	213	18	easy	easy	ADJ
fuelectenerg-1260	213	19	task	task	NOUN
fuelectenerg-1260	213	20	,	,	PUNCT
fuelectenerg-1260	213	21	in	in	ADP
fuelectenerg-1260	213	22	particular	particular	ADJ
fuelectenerg-1260	213	23	for	for	ADP
fuelectenerg-1260	213	24	mems	mem	NOUN
fuelectenerg-1260	213	25	.	.	PUNCT
fuelectenerg-1260	214	1	this	this	PRON
fuelectenerg-1260	214	2	is	be	AUX
fuelectenerg-1260	214	3	caused	cause	VERB
fuelectenerg-1260	214	4	by	by	ADP
fuelectenerg-1260	214	5	their	their	PRON
fuelectenerg-1260	214	6	multifaceted	multifaceted	ADJ
fuelectenerg-1260	214	7	,	,	PUNCT
fuelectenerg-1260	214	8	multivariate	multivariate	NOUN
fuelectenerg-1260	214	9	aspect	aspect	NOUN
fuelectenerg-1260	214	10	.	.	PUNCT
fuelectenerg-1260	215	1	we	we	PRON
fuelectenerg-1260	215	2	are	be	AUX
fuelectenerg-1260	215	3	dealing	deal	VERB
fuelectenerg-1260	215	4	with	with	ADP
fuelectenerg-1260	215	5	3d	3d	PROPN
fuelectenerg-1260	215	6	mechanical	mechanical	ADJ
fuelectenerg-1260	215	7	devices	device	NOUN
fuelectenerg-1260	215	8	,	,	PUNCT
fuelectenerg-1260	215	9	with	with	ADP
fuelectenerg-1260	215	10	critical	critical	ADJ
fuelectenerg-1260	215	11	timings	timing	NOUN
fuelectenerg-1260	215	12	(	(	PUNCT
fuelectenerg-1260	215	13	4d	4d	NUM
fuelectenerg-1260	215	14	)	)	PUNCT
fuelectenerg-1260	215	15	and	and	CCONJ
fuelectenerg-1260	215	16	acting	acting	NOUN
fuelectenerg-1260	215	17	forces	force	NOUN
fuelectenerg-1260	215	18	,	,	PUNCT
fuelectenerg-1260	215	19	sensing	sense	VERB
fuelectenerg-1260	215	20	,	,	PUNCT
fuelectenerg-1260	215	21	or	or	CCONJ
fuelectenerg-1260	215	22	performing	perform	VERB
fuelectenerg-1260	215	23	chemical	chemical	NOUN
fuelectenerg-1260	215	24	,	,	PUNCT
fuelectenerg-1260	215	25	spectral	spectral	ADJ
fuelectenerg-1260	215	26	analysis	analysis	NOUN
fuelectenerg-1260	215	27	or	or	CCONJ
fuelectenerg-1260	215	28	pattern	pattern	NOUN
fuelectenerg-1260	215	29	recognition	recognition	NOUN
fuelectenerg-1260	215	30	adding	add	VERB
fuelectenerg-1260	215	31	to	to	ADP
fuelectenerg-1260	215	32	the	the	DET
fuelectenerg-1260	215	33	complexity	complexity	NOUN
fuelectenerg-1260	215	34	and	and	CCONJ
fuelectenerg-1260	215	35	at	at	ADP
fuelectenerg-1260	215	36	the	the	DET
fuelectenerg-1260	215	37	time	time	NOUN
fuelectenerg-1260	215	38	of	of	ADP
fuelectenerg-1260	215	39	design	design	NOUN
fuelectenerg-1260	215	40	most	most	ADJ
fuelectenerg-1260	215	41	of	of	ADP
fuelectenerg-1260	215	42	it	it	PRON
fuelectenerg-1260	215	43	squeezed	squeeze	VERB
fuelectenerg-1260	215	44	into	into	ADP
fuelectenerg-1260	215	45	a	a	DET
fuelectenerg-1260	215	46	multiple	multiple	ADJ
fuelectenerg-1260	215	47	representation	representation	NOUN
fuelectenerg-1260	215	48	on	on	ADP
fuelectenerg-1260	215	49	a	a	DET
fuelectenerg-1260	215	50	2d	2d	NUM
fuelectenerg-1260	215	51	screen	screen	NOUN
fuelectenerg-1260	215	52	display	display	NOUN
fuelectenerg-1260	215	53	.	.	PUNCT
fuelectenerg-1260	216	1	to	to	PART
fuelectenerg-1260	216	2	aid	aid	VERB
fuelectenerg-1260	216	3	imagination	imagination	NOUN
fuelectenerg-1260	216	4	and	and	CCONJ
fuelectenerg-1260	216	5	interpretation	interpretation	NOUN
fuelectenerg-1260	216	6	,	,	PUNCT
fuelectenerg-1260	216	7	schematic	schematic	ADJ
fuelectenerg-1260	216	8	drawings	drawing	NOUN
fuelectenerg-1260	216	9	have	have	AUX
fuelectenerg-1260	216	10	progressively	progressively	ADV
fuelectenerg-1260	216	11	grown	grow	VERB
fuelectenerg-1260	216	12	into	into	ADP
fuelectenerg-1260	216	13	cad	cad	NOUN
fuelectenerg-1260	216	14	tools	tool	NOUN
fuelectenerg-1260	216	15	.	.	PUNCT
fuelectenerg-1260	217	1	these	these	PRON
fuelectenerg-1260	217	2	in	in	ADP
fuelectenerg-1260	217	3	turn	turn	NOUN
fuelectenerg-1260	217	4	have	have	AUX
fuelectenerg-1260	217	5	diversified	diversify	VERB
fuelectenerg-1260	217	6	for	for	ADP
fuelectenerg-1260	217	7	specific	specific	ADJ
fuelectenerg-1260	217	8	application	application	NOUN
fuelectenerg-1260	217	9	niches	niche	NOUN
fuelectenerg-1260	217	10	and	and	CCONJ
fuelectenerg-1260	217	11	with	with	ADP
fuelectenerg-1260	217	12	the	the	DET
fuelectenerg-1260	217	13	purpose	purpose	NOUN
fuelectenerg-1260	217	14	to	to	PART
fuelectenerg-1260	217	15	be	be	AUX
fuelectenerg-1260	217	16	fed	feed	VERB
fuelectenerg-1260	217	17	as	as	ADP
fuelectenerg-1260	217	18	a	a	DET
fuelectenerg-1260	217	19	run	run	NOUN
fuelectenerg-1260	217	20	specification	specification	NOUN
fuelectenerg-1260	217	21	program	program	NOUN
fuelectenerg-1260	217	22	into	into	ADP
fuelectenerg-1260	217	23	a	a	DET
fuelectenerg-1260	217	24	microlithography	microlithography	NOUN
fuelectenerg-1260	217	25	or	or	CCONJ
fuelectenerg-1260	217	26	micromachining	micromachine	VERB
fuelectenerg-1260	217	27	tool	tool	NOUN
fuelectenerg-1260	217	28	,	,	PUNCT
fuelectenerg-1260	217	29	e.g.	e.g.	ADV
fuelectenerg-1260	217	30	a	a	DET
fuelectenerg-1260	217	31	laser	laser	NOUN
fuelectenerg-1260	217	32	.	.	PUNCT
fuelectenerg-1260	218	1	the	the	DET
fuelectenerg-1260	218	2	reality	reality	NOUN
fuelectenerg-1260	218	3	is	be	AUX
fuelectenerg-1260	218	4	that	that	SCONJ
fuelectenerg-1260	218	5	design	design	NOUN
fuelectenerg-1260	218	6	is	be	AUX
fuelectenerg-1260	218	7	usually	usually	ADV
fuelectenerg-1260	218	8	a	a	DET
fuelectenerg-1260	218	9	mix	mix	NOUN
fuelectenerg-1260	218	10	of	of	ADP
fuelectenerg-1260	218	11	back	back	NOUN
fuelectenerg-1260	218	12	and	and	CCONJ
fuelectenerg-1260	218	13	forth	forth	ADV
fuelectenerg-1260	218	14	between	between	ADP
fuelectenerg-1260	218	15	simulations	simulation	NOUN
fuelectenerg-1260	218	16	and	and	CCONJ
fuelectenerg-1260	218	17	the	the	DET
fuelectenerg-1260	218	18	development	development	NOUN
fuelectenerg-1260	218	19	of	of	ADP
fuelectenerg-1260	218	20	prototypes	prototype	NOUN
fuelectenerg-1260	218	21	.	.	PUNCT
fuelectenerg-1260	219	1	it	it	PRON
fuelectenerg-1260	219	2	appears	appear	VERB
fuelectenerg-1260	219	3	that	that	SCONJ
fuelectenerg-1260	219	4	a	a	DET
fuelectenerg-1260	219	5	one	one	NUM
fuelectenerg-1260	219	6	-	-	PUNCT
fuelectenerg-1260	219	7	only	only	ADV
fuelectenerg-1260	219	8	streamlined	streamlined	ADJ
fuelectenerg-1260	219	9	workflow	workflow	NOUN
fuelectenerg-1260	219	10	that	that	PRON
fuelectenerg-1260	219	11	goes	go	VERB
fuelectenerg-1260	219	12	from	from	ADP
fuelectenerg-1260	219	13	the	the	DET
fuelectenerg-1260	219	14	cad	cad	NOUN
fuelectenerg-1260	219	15	drawing	drawing	NOUN
fuelectenerg-1260	219	16	board	board	NOUN
fuelectenerg-1260	219	17	to	to	ADP
fuelectenerg-1260	219	18	the	the	DET
fuelectenerg-1260	219	19	fabrication	fabrication	NOUN
fuelectenerg-1260	219	20	of	of	ADP
fuelectenerg-1260	219	21	a	a	DET
fuelectenerg-1260	219	22	prototype	prototype	NOUN
fuelectenerg-1260	219	23	does	do	AUX
fuelectenerg-1260	219	24	not	not	PART
fuelectenerg-1260	219	25	exist	exist	VERB
fuelectenerg-1260	219	26	yet	yet	ADV
fuelectenerg-1260	219	27	.	.	PUNCT
fuelectenerg-1260	220	1	in	in	ADP
fuelectenerg-1260	220	2	an	an	DET
fuelectenerg-1260	220	3	early	early	ADJ
fuelectenerg-1260	220	4	endeavour	endeavour	NOUN
fuelectenerg-1260	220	5	for	for	ADP
fuelectenerg-1260	220	6	optimum	optimum	ADJ
fuelectenerg-1260	220	7	design	design	NOUN
fuelectenerg-1260	220	8	,	,	PUNCT
fuelectenerg-1260	220	9	gaddi	gaddi	NOUN
fuelectenerg-1260	220	10	et	et	PROPN
fuelectenerg-1260	220	11	al	al	PROPN
fuelectenerg-1260	220	12	.	.	PROPN
fuelectenerg-1260	220	13	have	have	AUX
fuelectenerg-1260	220	14	developed	develop	VERB
fuelectenerg-1260	220	15	a	a	DET
fuelectenerg-1260	220	16	framework	framework	NOUN
fuelectenerg-1260	220	17	for	for	ADP
fuelectenerg-1260	220	18	a	a	DET
fuelectenerg-1260	220	19	top	top	ADJ
fuelectenerg-1260	220	20	down	down	ADP
fuelectenerg-1260	220	21	design	design	NOUN
fuelectenerg-1260	220	22	approach	approach	NOUN
fuelectenerg-1260	220	23	based	base	VERB
fuelectenerg-1260	220	24	on	on	ADP
fuelectenerg-1260	220	25	ic	ic	PROPN
fuelectenerg-1260	220	26	design	design	NOUN
fuelectenerg-1260	220	27	and	and	CCONJ
fuelectenerg-1260	220	28	electrical	electrical	ADJ
fuelectenerg-1260	220	29	and	and	CCONJ
fuelectenerg-1260	220	30	mechanical	mechanical	ADJ
fuelectenerg-1260	220	31	parameters	parameter	NOUN
fuelectenerg-1260	220	32	.	.	PUNCT
fuelectenerg-1260	221	1	their	their	PRON
fuelectenerg-1260	221	2	aim	aim	NOUN
fuelectenerg-1260	221	3	was	be	AUX
fuelectenerg-1260	221	4	for	for	ADP
fuelectenerg-1260	221	5	a	a	DET
fuelectenerg-1260	221	6	hierarchically	hierarchically	ADV
fuelectenerg-1260	221	7	mixed	mixed	ADJ
fuelectenerg-1260	221	8	design	design	NOUN
fuelectenerg-1260	221	9	environment	environment	NOUN
fuelectenerg-1260	221	10	,	,	PUNCT
fuelectenerg-1260	221	11	using	use	VERB
fuelectenerg-1260	221	12	fea	fea	NOUN
fuelectenerg-1260	221	13	for	for	ADP
fuelectenerg-1260	221	14	validation	validation	NOUN
fuelectenerg-1260	221	15	[	[	X
fuelectenerg-1260	221	16	47	47	NUM
fuelectenerg-1260	221	17	]	]	PUNCT
fuelectenerg-1260	221	18	.	.	PUNCT
fuelectenerg-1260	222	1	this	this	PRON
fuelectenerg-1260	222	2	is	be	AUX
fuelectenerg-1260	222	3	unusual	unusual	ADJ
fuelectenerg-1260	222	4	,	,	PUNCT
fuelectenerg-1260	222	5	because	because	SCONJ
fuelectenerg-1260	222	6	fea	fea	PROPN
fuelectenerg-1260	222	7	are	be	AUX
fuelectenerg-1260	222	8	normally	normally	ADV
fuelectenerg-1260	222	9	used	use	VERB
fuelectenerg-1260	222	10	for	for	ADP
fuelectenerg-1260	222	11	calculating	calculate	VERB
fuelectenerg-1260	222	12	optimal	optimal	ADJ
fuelectenerg-1260	222	13	parameter	parameter	NOUN
fuelectenerg-1260	222	14	combinations	combination	NOUN
fuelectenerg-1260	222	15	in	in	ADP
fuelectenerg-1260	222	16	a	a	DET
fuelectenerg-1260	222	17	systematic	systematic	ADJ
fuelectenerg-1260	222	18	set	set	NOUN
fuelectenerg-1260	222	19	of	of	ADP
fuelectenerg-1260	222	20	simulations	simulation	NOUN
fuelectenerg-1260	222	21	,	,	PUNCT
fuelectenerg-1260	222	22	not	not	PART
fuelectenerg-1260	222	23	the	the	DET
fuelectenerg-1260	222	24	other	other	ADJ
fuelectenerg-1260	222	25	way	way	NOUN
fuelectenerg-1260	222	26	round	round	ADV
fuelectenerg-1260	222	27	.	.	PUNCT
fuelectenerg-1260	223	1	this	this	DET
fuelectenerg-1260	223	2	model	model	NOUN
fuelectenerg-1260	223	3	appears	appear	VERB
fuelectenerg-1260	223	4	to	to	PART
fuelectenerg-1260	223	5	be	be	AUX
fuelectenerg-1260	223	6	limited	limit	VERB
fuelectenerg-1260	223	7	to	to	ADP
fuelectenerg-1260	223	8	silicon	silicon	NOUN
fuelectenerg-1260	223	9	technology	technology	NOUN
fuelectenerg-1260	223	10	.	.	PUNCT
fuelectenerg-1260	224	1	one	one	NUM
fuelectenerg-1260	224	2	very	very	ADV
fuelectenerg-1260	224	3	early	early	ADJ
fuelectenerg-1260	224	4	cad	cad	PROPN
fuelectenerg-1260	224	5	tool	tool	NOUN
fuelectenerg-1260	224	6	was	be	AUX
fuelectenerg-1260	224	7	developed	develop	VERB
fuelectenerg-1260	224	8	by	by	ADP
fuelectenerg-1260	224	9	dasigenis	dasigenis	PROPN
fuelectenerg-1260	224	10	et	et	PROPN
fuelectenerg-1260	224	11	al	al	PROPN
fuelectenerg-1260	224	12	.	.	PUNCT
fuelectenerg-1260	225	1	their	their	PRON
fuelectenerg-1260	225	2	cad	cad	PROPN
fuelectenerg-1260	225	3	tool	tool	NOUN
fuelectenerg-1260	225	4	recycles	recycle	VERB
fuelectenerg-1260	225	5	a	a	DET
fuelectenerg-1260	225	6	previous	previous	ADJ
fuelectenerg-1260	225	7	mems	mem	NOUN
fuelectenerg-1260	225	8	converter	converter	NOUN
fuelectenerg-1260	225	9	design	design	NOUN
fuelectenerg-1260	225	10	and	and	CCONJ
fuelectenerg-1260	225	11	allows	allow	VERB
fuelectenerg-1260	225	12	its	its	PRON
fuelectenerg-1260	225	13	updating	updating	NOUN
fuelectenerg-1260	225	14	to	to	ADP
fuelectenerg-1260	225	15	a	a	DET
fuelectenerg-1260	225	16	new	new	ADJ
fuelectenerg-1260	225	17	design	design	NOUN
fuelectenerg-1260	225	18	and	and	CCONJ
fuelectenerg-1260	225	19	producing	produce	VERB
fuelectenerg-1260	225	20	its	its	PRON
fuelectenerg-1260	225	21	new	new	ADJ
fuelectenerg-1260	225	22	processing	processing	NOUN
fuelectenerg-1260	225	23	parameters	parameter	NOUN
fuelectenerg-1260	225	24	[	[	X
fuelectenerg-1260	225	25	48	48	NUM
fuelectenerg-1260	225	26	]	]	PUNCT
fuelectenerg-1260	225	27	.	.	PUNCT
fuelectenerg-1260	226	1	this	this	DET
fuelectenerg-1260	226	2	approach	approach	NOUN
fuelectenerg-1260	226	3	is	be	AUX
fuelectenerg-1260	226	4	devoid	devoid	ADJ
fuelectenerg-1260	226	5	of	of	ADP
fuelectenerg-1260	226	6	any	any	DET
fuelectenerg-1260	226	7	modern	modern	ADJ
fuelectenerg-1260	226	8	user	user	NOUN
fuelectenerg-1260	226	9	/	/	SYM
fuelectenerg-1260	226	10	menu	menu	NOUN
fuelectenerg-1260	226	11	driven	drive	VERB
fuelectenerg-1260	226	12	software	software	NOUN
fuelectenerg-1260	226	13	or	or	CCONJ
fuelectenerg-1260	226	14	architecture	architecture	NOUN
fuelectenerg-1260	226	15	facilities	facility	NOUN
fuelectenerg-1260	226	16	.	.	PUNCT
fuelectenerg-1260	227	1	it	it	PRON
fuelectenerg-1260	227	2	equates	equate	VERB
fuelectenerg-1260	227	3	to	to	ADP
fuelectenerg-1260	227	4	building	build	VERB
fuelectenerg-1260	227	5	up	up	ADP
fuelectenerg-1260	227	6	a	a	DET
fuelectenerg-1260	227	7	library	library	NOUN
fuelectenerg-1260	227	8	from	from	ADP
fuelectenerg-1260	227	9	scratch	scratch	NOUN
fuelectenerg-1260	227	10	each	each	DET
fuelectenerg-1260	227	11	time	time	NOUN
fuelectenerg-1260	227	12	when	when	SCONJ
fuelectenerg-1260	227	13	it	it	PRON
fuelectenerg-1260	227	14	comes	come	VERB
fuelectenerg-1260	227	15	to	to	ADP
fuelectenerg-1260	227	16	designing	design	VERB
fuelectenerg-1260	227	17	another	another	DET
fuelectenerg-1260	227	18	device	device	NOUN
fuelectenerg-1260	227	19	,	,	PUNCT
fuelectenerg-1260	227	20	using	use	VERB
fuelectenerg-1260	227	21	a	a	DET
fuelectenerg-1260	227	22	new	new	ADJ
fuelectenerg-1260	227	23	technology	technology	NOUN
fuelectenerg-1260	227	24	or	or	CCONJ
fuelectenerg-1260	227	25	materials	material	NOUN
fuelectenerg-1260	227	26	.	.	PUNCT
fuelectenerg-1260	228	1	a	a	DET
fuelectenerg-1260	228	2	classic	classic	ADJ
fuelectenerg-1260	228	3	computing	computing	NOUN
fuelectenerg-1260	228	4	simplification	simplification	NOUN
fuelectenerg-1260	228	5	approach	approach	NOUN
fuelectenerg-1260	228	6	was	be	AUX
fuelectenerg-1260	228	7	chosen	choose	VERB
fuelectenerg-1260	228	8	by	by	ADP
fuelectenerg-1260	228	9	bardohl	bardohl	PROPN
fuelectenerg-1260	228	10	et	et	PROPN
fuelectenerg-1260	228	11	al	al	PROPN
fuelectenerg-1260	228	12	.	.	PROPN
fuelectenerg-1260	228	13	,	,	PUNCT
fuelectenerg-1260	228	14	who	who	PRON
fuelectenerg-1260	228	15	have	have	AUX
fuelectenerg-1260	228	16	used	use	VERB
fuelectenerg-1260	228	17	graph	graph	NOUN
fuelectenerg-1260	228	18	(	(	PUNCT
fuelectenerg-1260	228	19	that	that	PRON
fuelectenerg-1260	228	20	is	be	AUX
fuelectenerg-1260	228	21	the	the	DET
fuelectenerg-1260	228	22	graph	graph	NOUN
fuelectenerg-1260	228	23	description	description	NOUN
fuelectenerg-1260	228	24	of	of	ADP
fuelectenerg-1260	228	25	images	image	NOUN
fuelectenerg-1260	228	26	)	)	PUNCT
fuelectenerg-1260	228	27	and	and	CCONJ
fuelectenerg-1260	228	28	transforming	transform	VERB
fuelectenerg-1260	228	29	it	it	PRON
fuelectenerg-1260	228	30	into	into	ADP
fuelectenerg-1260	228	31	sets	set	NOUN
fuelectenerg-1260	228	32	of	of	ADP
fuelectenerg-1260	228	33	reduced	reduced	ADJ
fuelectenerg-1260	228	34	graphs	graph	NOUN
fuelectenerg-1260	228	35	[	[	X
fuelectenerg-1260	228	36	49	49	NUM
fuelectenerg-1260	228	37	]	]	PUNCT
fuelectenerg-1260	228	38	.	.	PUNCT
fuelectenerg-1260	229	1	it	it	PRON
fuelectenerg-1260	229	2	is	be	AUX
fuelectenerg-1260	229	3	questionable	questionable	ADJ
fuelectenerg-1260	229	4	,	,	PUNCT
fuelectenerg-1260	229	5	whether	whether	SCONJ
fuelectenerg-1260	229	6	these	these	DET
fuelectenerg-1260	229	7	transformations	transformation	NOUN
fuelectenerg-1260	229	8	for	for	ADP
fuelectenerg-1260	229	9	reducing	reduce	VERB
fuelectenerg-1260	229	10	information	information	NOUN
fuelectenerg-1260	229	11	handling	handling	NOUN
fuelectenerg-1260	229	12	are	be	AUX
fuelectenerg-1260	229	13	efficient	efficient	ADJ
fuelectenerg-1260	229	14	or	or	CCONJ
fuelectenerg-1260	229	15	even	even	ADV
fuelectenerg-1260	229	16	practical	practical	ADJ
fuelectenerg-1260	229	17	in	in	ADP
fuelectenerg-1260	229	18	a	a	DET
fuelectenerg-1260	229	19	mems	mem	NOUN
fuelectenerg-1260	229	20	–	–	PUNCT
fuelectenerg-1260	229	21	cad	cad	NOUN
fuelectenerg-1260	229	22	application	application	NOUN
fuelectenerg-1260	229	23	.	.	PUNCT
fuelectenerg-1260	230	1	in	in	ADP
fuelectenerg-1260	230	2	a	a	DET
fuelectenerg-1260	230	3	biometric	biometric	ADJ
fuelectenerg-1260	230	4	approach	approach	NOUN
fuelectenerg-1260	230	5	to	to	ADP
fuelectenerg-1260	230	6	manufacturing	manufacture	VERB
fuelectenerg-1260	230	7	biomedical	biomedical	ADJ
fuelectenerg-1260	230	8	microdevices	microdevice	NOUN
fuelectenerg-1260	230	9	,	,	PUNCT
fuelectenerg-1260	230	10	hengsbach	hengsbach	NOUN
fuelectenerg-1260	230	11	and	and	CCONJ
fuelectenerg-1260	230	12	díaz	díaz	PROPN
fuelectenerg-1260	230	13	lantada	lantada	PROPN
fuelectenerg-1260	230	14	have	have	AUX
fuelectenerg-1260	230	15	produced	produce	VERB
fuelectenerg-1260	230	16	a	a	DET
fuelectenerg-1260	230	17	multiscale	multiscale	ADJ
fuelectenerg-1260	230	18	biomedical	biomedical	ADJ
fuelectenerg-1260	230	19	microsystem	microsystem	NOUN
fuelectenerg-1260	230	20	for	for	ADP
fuelectenerg-1260	230	21	addressing	address	VERB
fuelectenerg-1260	230	22	the	the	DET
fuelectenerg-1260	230	23	effect	effect	NOUN
fuelectenerg-1260	230	24	of	of	ADP
fuelectenerg-1260	230	25	surface	surface	NOUN
fuelectenerg-1260	230	26	texture	texture	NOUN
fuelectenerg-1260	230	27	on	on	ADP
fuelectenerg-1260	230	28	the	the	DET
fuelectenerg-1260	230	29	cell	cell	NOUN
fuelectenerg-1260	230	30	mobility	mobility	NOUN
fuelectenerg-1260	230	31	.	.	PUNCT
fuelectenerg-1260	231	1	the	the	DET
fuelectenerg-1260	231	2	purpose	purpose	NOUN
fuelectenerg-1260	231	3	was	be	AUX
fuelectenerg-1260	231	4	to	to	PART
fuelectenerg-1260	231	5	fabricate	fabricate	VERB
fuelectenerg-1260	231	6	multiple	multiple	ADJ
fuelectenerg-1260	231	7	length	length	NOUN
fuelectenerg-1260	231	8	scale	scale	NOUN
fuelectenerg-1260	231	9	geometries	geometry	NOUN
fuelectenerg-1260	231	10	that	that	PRON
fuelectenerg-1260	231	11	allow	allow	VERB
fuelectenerg-1260	231	12	interactions	interaction	NOUN
fuelectenerg-1260	231	13	of	of	ADP
fuelectenerg-1260	231	14	implants	implant	NOUN
fuelectenerg-1260	231	15	with	with	ADP
fuelectenerg-1260	231	16	living	live	VERB
fuelectenerg-1260	231	17	tissues	tissue	NOUN
fuelectenerg-1260	231	18	.	.	PUNCT
fuelectenerg-1260	232	1	they	they	PRON
fuelectenerg-1260	232	2	used	use	VERB
fuelectenerg-1260	232	3	a	a	DET
fuelectenerg-1260	232	4	laser	laser	NOUN
fuelectenerg-1260	232	5	writer	writer	NOUN
fuelectenerg-1260	232	6	for	for	ADP
fuelectenerg-1260	232	7	the	the	DET
fuelectenerg-1260	232	8	device	device	NOUN
fuelectenerg-1260	232	9	structure	structure	NOUN
fuelectenerg-1260	232	10	(	(	PUNCT
fuelectenerg-1260	232	11	several	several	ADJ
fuelectenerg-1260	232	12	mm	mm	NOUN
fuelectenerg-1260	232	13	)	)	PUNCT
fuelectenerg-1260	232	14	and	and	CCONJ
fuelectenerg-1260	232	15	a	a	DET
fuelectenerg-1260	232	16	direct	direct	ADJ
fuelectenerg-1260	232	17	laser	laser	NOUN
fuelectenerg-1260	232	18	writer	writer	NOUN
fuelectenerg-1260	232	19	for	for	ADP
fuelectenerg-1260	232	20	finer	fine	ADJ
fuelectenerg-1260	232	21	,	,	PUNCT
fuelectenerg-1260	232	22	submicron	submicron	NOUN
fuelectenerg-1260	232	23	size	size	NOUN
fuelectenerg-1260	232	24	details	detail	NOUN
fuelectenerg-1260	232	25	.	.	PUNCT
fuelectenerg-1260	233	1	one	one	NUM
fuelectenerg-1260	233	2	problem	problem	NOUN
fuelectenerg-1260	233	3	that	that	PRON
fuelectenerg-1260	233	4	arose	arise	VERB
fuelectenerg-1260	233	5	with	with	ADP
fuelectenerg-1260	233	6	the	the	DET
fuelectenerg-1260	233	7	fine	fine	ADJ
fuelectenerg-1260	233	8	textures	texture	NOUN
fuelectenerg-1260	233	9	and	and	CCONJ
fuelectenerg-1260	233	10	microstructures	microstructure	NOUN
fuelectenerg-1260	233	11	was	be	AUX
fuelectenerg-1260	233	12	the	the	DET
fuelectenerg-1260	233	13	cad	cad	NOUN
fuelectenerg-1260	233	14	file	file	NOUN
fuelectenerg-1260	233	15	size	size	NOUN
fuelectenerg-1260	233	16	of	of	ADP
fuelectenerg-1260	233	17	several	several	ADJ
fuelectenerg-1260	233	18	hundred	hundred	NUM
fuelectenerg-1260	233	19	mb	mb	NOUN
fuelectenerg-1260	233	20	and	and	CCONJ
fuelectenerg-1260	233	21	some	some	DET
fuelectenerg-1260	233	22	gb	gb	NOUN
fuelectenerg-1260	233	23	,	,	PUNCT
fuelectenerg-1260	233	24	which	which	PRON
fuelectenerg-1260	233	25	in	in	ADP
fuelectenerg-1260	233	26	turn	turn	NOUN
fuelectenerg-1260	233	27	affected	affect	VERB
fuelectenerg-1260	233	28	the	the	DET
fuelectenerg-1260	233	29	fabrication	fabrication	NOUN
fuelectenerg-1260	233	30	time	time	NOUN
fuelectenerg-1260	233	31	excessively	excessively	ADV
fuelectenerg-1260	233	32	.	.	PUNCT
fuelectenerg-1260	234	1	the	the	DET
fuelectenerg-1260	234	2	solution	solution	NOUN
fuelectenerg-1260	234	3	was	be	AUX
fuelectenerg-1260	234	4	to	to	PART
fuelectenerg-1260	234	5	revert	revert	VERB
fuelectenerg-1260	234	6	from	from	ADP
fuelectenerg-1260	234	7	a	a	DET
fuelectenerg-1260	234	8	descriptive	descriptive	ADJ
fuelectenerg-1260	234	9	geometry	geometry	NOUN
fuelectenerg-1260	234	10	as	as	ADP
fuelectenerg-1260	234	11	sets	set	NOUN
fuelectenerg-1260	234	12	of	of	ADP
fuelectenerg-1260	234	13	layers	layer	NOUN
fuelectenerg-1260	234	14	to	to	ADP
fuelectenerg-1260	234	15	algorithmic	algorithmic	ADJ
fuelectenerg-1260	234	16	geometry	geometry	NOUN
fuelectenerg-1260	234	17	,	,	PUNCT
fuelectenerg-1260	234	18	by	by	ADP
fuelectenerg-1260	234	19	mapping	map	VERB
fuelectenerg-1260	234	20	a	a	DET
fuelectenerg-1260	234	21	grid	grid	NOUN
fuelectenerg-1260	234	22	of	of	ADP
fuelectenerg-1260	234	23	channels	channel	NOUN
fuelectenerg-1260	234	24	as	as	ADP
fuelectenerg-1260	234	25	fractal	fractal	ADJ
fuelectenerg-1260	234	26	surface	surface	NOUN
fuelectenerg-1260	234	27	functions	function	NOUN
fuelectenerg-1260	234	28	to	to	ADP
fuelectenerg-1260	234	29	a	a	DET
fuelectenerg-1260	234	30	matrix	matrix	NOUN
fuelectenerg-1260	234	31	.	.	PUNCT
fuelectenerg-1260	235	1	this	this	PRON
fuelectenerg-1260	235	2	reduced	reduce	VERB
fuelectenerg-1260	235	3	the	the	DET
fuelectenerg-1260	235	4	fabrication	fabrication	NOUN
fuelectenerg-1260	235	5	time	time	NOUN
fuelectenerg-1260	235	6	by	by	ADP
fuelectenerg-1260	235	7	more	more	ADJ
fuelectenerg-1260	235	8	than	than	ADP
fuelectenerg-1260	235	9	one	one	NUM
fuelectenerg-1260	235	10	order	order	NOUN
fuelectenerg-1260	235	11	of	of	ADP
fuelectenerg-1260	235	12	magnitude	magnitude	NOUN
fuelectenerg-1260	235	13	[	[	X
fuelectenerg-1260	235	14	50	50	NUM
fuelectenerg-1260	235	15	]	]	PUNCT
fuelectenerg-1260	235	16	.	.	PUNCT
fuelectenerg-1260	236	1	mems	mem	NOUN
fuelectenerg-1260	236	2	design	design	NOUN
fuelectenerg-1260	236	3	simplification	simplification	NOUN
fuelectenerg-1260	236	4	with	with	ADP
fuelectenerg-1260	236	5	virtual	virtual	ADJ
fuelectenerg-1260	236	6	prototyping	prototype	VERB
fuelectenerg-1260	236	7	19	19	NUM
fuelectenerg-1260	236	8	another	another	DET
fuelectenerg-1260	236	9	problem	problem	NOUN
fuelectenerg-1260	236	10	that	that	PRON
fuelectenerg-1260	236	11	requires	require	VERB
fuelectenerg-1260	236	12	attention	attention	NOUN
fuelectenerg-1260	236	13	is	be	AUX
fuelectenerg-1260	236	14	that	that	SCONJ
fuelectenerg-1260	236	15	in	in	ADP
fuelectenerg-1260	236	16	the	the	DET
fuelectenerg-1260	236	17	design	design	NOUN
fuelectenerg-1260	236	18	of	of	ADP
fuelectenerg-1260	236	19	mems	mem	NOUN
fuelectenerg-1260	236	20	different	different	ADJ
fuelectenerg-1260	236	21	physical	physical	ADJ
fuelectenerg-1260	236	22	or	or	CCONJ
fuelectenerg-1260	236	23	chemical	chemical	NOUN
fuelectenerg-1260	236	24	phenomena	phenomenon	NOUN
fuelectenerg-1260	236	25	must	must	AUX
fuelectenerg-1260	236	26	be	be	AUX
fuelectenerg-1260	236	27	simulated	simulate	VERB
fuelectenerg-1260	236	28	.	.	PUNCT
fuelectenerg-1260	237	1	that	that	PRON
fuelectenerg-1260	237	2	means	mean	VERB
fuelectenerg-1260	237	3	several	several	ADJ
fuelectenerg-1260	237	4	suites	suite	NOUN
fuelectenerg-1260	237	5	of	of	ADP
fuelectenerg-1260	237	6	solvers	solver	NOUN
fuelectenerg-1260	237	7	,	,	PUNCT
fuelectenerg-1260	237	8	and	and	CCONJ
fuelectenerg-1260	237	9	because	because	SCONJ
fuelectenerg-1260	237	10	they	they	PRON
fuelectenerg-1260	237	11	require	require	VERB
fuelectenerg-1260	237	12	surface	surface	NOUN
fuelectenerg-1260	237	13	or	or	CCONJ
fuelectenerg-1260	237	14	volume	volume	NOUN
fuelectenerg-1260	237	15	meshing	meshing	NOUN
fuelectenerg-1260	237	16	for	for	ADP
fuelectenerg-1260	237	17	their	their	PRON
fuelectenerg-1260	237	18	calculations	calculation	NOUN
fuelectenerg-1260	237	19	,	,	PUNCT
fuelectenerg-1260	237	20	they	they	PRON
fuelectenerg-1260	237	21	are	be	AUX
fuelectenerg-1260	237	22	slow	slow	ADJ
fuelectenerg-1260	237	23	and	and	CCONJ
fuelectenerg-1260	237	24	not	not	PART
fuelectenerg-1260	237	25	suitable	suitable	ADJ
fuelectenerg-1260	237	26	for	for	ADP
fuelectenerg-1260	237	27	interactive	interactive	ADJ
fuelectenerg-1260	237	28	design	design	NOUN
fuelectenerg-1260	237	29	.	.	PUNCT
fuelectenerg-1260	238	1	this	this	PRON
fuelectenerg-1260	238	2	is	be	AUX
fuelectenerg-1260	238	3	an	an	DET
fuelectenerg-1260	238	4	inconvenience	inconvenience	NOUN
fuelectenerg-1260	238	5	with	with	ADP
fuelectenerg-1260	238	6	all	all	DET
fuelectenerg-1260	238	7	currently	currently	ADV
fuelectenerg-1260	238	8	existing	exist	VERB
fuelectenerg-1260	238	9	cad	cad	NOUN
fuelectenerg-1260	238	10	products	product	NOUN
fuelectenerg-1260	238	11	for	for	ADP
fuelectenerg-1260	238	12	mems	mem	NOUN
fuelectenerg-1260	238	13	that	that	PRON
fuelectenerg-1260	238	14	are	be	AUX
fuelectenerg-1260	238	15	on	on	ADP
fuelectenerg-1260	238	16	the	the	DET
fuelectenerg-1260	238	17	market	market	NOUN
fuelectenerg-1260	238	18	,	,	PUNCT
fuelectenerg-1260	238	19	for	for	ADP
fuelectenerg-1260	238	20	example	example	NOUN
fuelectenerg-1260	238	21	coventor	coventor	NOUN
fuelectenerg-1260	238	22	tm	tm	PROPN
fuelectenerg-1260	239	1	[	[	X
fuelectenerg-1260	239	2	51	51	NUM
fuelectenerg-1260	239	3	]	]	PUNCT
fuelectenerg-1260	239	4	,	,	PUNCT
fuelectenerg-1260	239	5	memspro	memspro	ADJ
fuelectenerg-1260	239	6	tm	tm	PROPN
fuelectenerg-1260	239	7	[	[	X
fuelectenerg-1260	239	8	52	52	NUM
fuelectenerg-1260	239	9	]	]	PUNCT
fuelectenerg-1260	239	10	,	,	PUNCT
fuelectenerg-1260	239	11	tanner	tanner	NOUN
fuelectenerg-1260	239	12	tm	tm	NOUN
fuelectenerg-1260	239	13	mems	mems	PROPN
fuelectenerg-1260	239	14	design	design	NOUN
fuelectenerg-1260	239	15	flow	flow	NOUN
fuelectenerg-1260	240	1	[	[	X
fuelectenerg-1260	240	2	53	53	NUM
fuelectenerg-1260	240	3	]	]	PUNCT
fuelectenerg-1260	240	4	,	,	PUNCT
fuelectenerg-1260	240	5	intellisuite	intellisuite	ADJ
fuelectenerg-1260	240	6	tm	tm	X
fuelectenerg-1260	241	1	[	[	X
fuelectenerg-1260	241	2	54	54	NUM
fuelectenerg-1260	241	3	]	]	PUNCT
fuelectenerg-1260	241	4	and	and	CCONJ
fuelectenerg-1260	241	5	others	other	NOUN
fuelectenerg-1260	241	6	.	.	PUNCT
fuelectenerg-1260	242	1	they	they	PRON
fuelectenerg-1260	242	2	offer	offer	VERB
fuelectenerg-1260	242	3	mixed	mixed	ADJ
fuelectenerg-1260	242	4	capabilities	capability	NOUN
fuelectenerg-1260	242	5	,	,	PUNCT
fuelectenerg-1260	242	6	mixed	mixed	ADJ
fuelectenerg-1260	242	7	interactive	interactive	ADJ
fuelectenerg-1260	242	8	facilities	facility	NOUN
fuelectenerg-1260	242	9	,	,	PUNCT
fuelectenerg-1260	242	10	speed	speed	NOUN
fuelectenerg-1260	242	11	and	and	CCONJ
fuelectenerg-1260	242	12	popularity	popularity	NOUN
fuelectenerg-1260	242	13	.	.	PUNCT
fuelectenerg-1260	243	1	some	some	PRON
fuelectenerg-1260	243	2	of	of	ADP
fuelectenerg-1260	243	3	them	they	PRON
fuelectenerg-1260	243	4	are	be	AUX
fuelectenerg-1260	243	5	sophisticated	sophisticated	ADJ
fuelectenerg-1260	243	6	but	but	CCONJ
fuelectenerg-1260	243	7	all	all	PRON
fuelectenerg-1260	243	8	require	require	VERB
fuelectenerg-1260	243	9	a	a	DET
fuelectenerg-1260	243	10	good	good	ADJ
fuelectenerg-1260	243	11	understanding	understanding	NOUN
fuelectenerg-1260	243	12	of	of	ADP
fuelectenerg-1260	243	13	physics	physics	NOUN
fuelectenerg-1260	243	14	,	,	PUNCT
fuelectenerg-1260	243	15	mathematics	mathematic	NOUN
fuelectenerg-1260	243	16	,	,	PUNCT
fuelectenerg-1260	243	17	engineering	engineering	NOUN
fuelectenerg-1260	243	18	,	,	PUNCT
fuelectenerg-1260	243	19	knowledge	knowledge	NOUN
fuelectenerg-1260	243	20	in	in	ADP
fuelectenerg-1260	243	21	mems	mem	NOUN
fuelectenerg-1260	243	22	design	design	NOUN
fuelectenerg-1260	243	23	and	and	CCONJ
fuelectenerg-1260	243	24	training	training	NOUN
fuelectenerg-1260	243	25	time	time	NOUN
fuelectenerg-1260	243	26	to	to	PART
fuelectenerg-1260	243	27	use	use	VERB
fuelectenerg-1260	243	28	the	the	DET
fuelectenerg-1260	243	29	cad	cad	PROPN
fuelectenerg-1260	243	30	package	package	NOUN
fuelectenerg-1260	243	31	efficiently	efficiently	ADV
fuelectenerg-1260	243	32	.	.	PUNCT
fuelectenerg-1260	244	1	computing	compute	VERB
fuelectenerg-1260	244	2	power	power	NOUN
fuelectenerg-1260	244	3	has	have	AUX
fuelectenerg-1260	244	4	not	not	PART
fuelectenerg-1260	244	5	yet	yet	ADV
fuelectenerg-1260	244	6	resolved	resolve	VERB
fuelectenerg-1260	244	7	the	the	DET
fuelectenerg-1260	244	8	problem	problem	NOUN
fuelectenerg-1260	244	9	of	of	ADP
fuelectenerg-1260	244	10	speed	speed	NOUN
fuelectenerg-1260	244	11	,	,	PUNCT
fuelectenerg-1260	244	12	the	the	DET
fuelectenerg-1260	244	13	very	very	ADJ
fuelectenerg-1260	244	14	essence	essence	NOUN
fuelectenerg-1260	244	15	for	for	ADP
fuelectenerg-1260	244	16	rapid	rapid	ADJ
fuelectenerg-1260	244	17	prototyping	prototyping	NOUN
fuelectenerg-1260	244	18	.	.	PUNCT
fuelectenerg-1260	245	1	4	4	X
fuelectenerg-1260	245	2	.	.	X
fuelectenerg-1260	245	3	prototyping	prototype	VERB
fuelectenerg-1260	245	4	for	for	ADP
fuelectenerg-1260	245	5	larger	large	ADJ
fuelectenerg-1260	245	6	systems	system	NOUN
fuelectenerg-1260	245	7	,	,	PUNCT
fuelectenerg-1260	245	8	industrial	industrial	ADJ
fuelectenerg-1260	245	9	rapid	rapid	ADJ
fuelectenerg-1260	245	10	prototyping	prototyping	NOUN
fuelectenerg-1260	245	11	played	play	VERB
fuelectenerg-1260	245	12	a	a	DET
fuelectenerg-1260	245	13	substantial	substantial	ADJ
fuelectenerg-1260	245	14	role	role	NOUN
fuelectenerg-1260	245	15	in	in	ADP
fuelectenerg-1260	245	16	the	the	DET
fuelectenerg-1260	245	17	development	development	NOUN
fuelectenerg-1260	245	18	of	of	ADP
fuelectenerg-1260	245	19	new	new	ADJ
fuelectenerg-1260	245	20	articles	article	NOUN
fuelectenerg-1260	245	21	.	.	PUNCT
fuelectenerg-1260	246	1	a	a	DET
fuelectenerg-1260	246	2	prototype	prototype	NOUN
fuelectenerg-1260	246	3	is	be	AUX
fuelectenerg-1260	246	4	a	a	DET
fuelectenerg-1260	246	5	model	model	NOUN
fuelectenerg-1260	246	6	of	of	ADP
fuelectenerg-1260	246	7	a	a	DET
fuelectenerg-1260	246	8	device	device	NOUN
fuelectenerg-1260	246	9	with	with	ADP
fuelectenerg-1260	246	10	emphasis	emphasis	NOUN
fuelectenerg-1260	246	11	on	on	ADP
fuelectenerg-1260	246	12	either	either	CCONJ
fuelectenerg-1260	246	13	replicating	replicate	VERB
fuelectenerg-1260	246	14	its	its	PRON
fuelectenerg-1260	246	15	functioning	functioning	NOUN
fuelectenerg-1260	246	16	and	and	CCONJ
fuelectenerg-1260	246	17	scale	scale	NOUN
fuelectenerg-1260	246	18	(	(	PUNCT
fuelectenerg-1260	246	19	dimensions	dimension	NOUN
fuelectenerg-1260	246	20	)	)	PUNCT
fuelectenerg-1260	246	21	of	of	ADP
fuelectenerg-1260	246	22	the	the	DET
fuelectenerg-1260	246	23	intended	intend	VERB
fuelectenerg-1260	246	24	device	device	NOUN
fuelectenerg-1260	246	25	,	,	PUNCT
fuelectenerg-1260	246	26	or	or	CCONJ
fuelectenerg-1260	246	27	to	to	PART
fuelectenerg-1260	246	28	study	study	VERB
fuelectenerg-1260	246	29	its	its	PRON
fuelectenerg-1260	246	30	production	production	NOUN
fuelectenerg-1260	246	31	feasibility	feasibility	NOUN
fuelectenerg-1260	246	32	.	.	PUNCT
fuelectenerg-1260	247	1	if	if	SCONJ
fuelectenerg-1260	247	2	the	the	DET
fuelectenerg-1260	247	3	aim	aim	NOUN
fuelectenerg-1260	247	4	is	be	AUX
fuelectenerg-1260	247	5	to	to	PART
fuelectenerg-1260	247	6	study	study	VERB
fuelectenerg-1260	247	7	the	the	DET
fuelectenerg-1260	247	8	functioning	functioning	NOUN
fuelectenerg-1260	247	9	,	,	PUNCT
fuelectenerg-1260	247	10	then	then	ADV
fuelectenerg-1260	247	11	neither	neither	PRON
fuelectenerg-1260	247	12	materials	material	NOUN
fuelectenerg-1260	247	13	nor	nor	CCONJ
fuelectenerg-1260	247	14	the	the	DET
fuelectenerg-1260	247	15	production	production	NOUN
fuelectenerg-1260	247	16	process	process	NOUN
fuelectenerg-1260	247	17	need	need	VERB
fuelectenerg-1260	247	18	to	to	PART
fuelectenerg-1260	247	19	be	be	AUX
fuelectenerg-1260	247	20	the	the	DET
fuelectenerg-1260	247	21	same	same	ADJ
fuelectenerg-1260	247	22	as	as	ADP
fuelectenerg-1260	247	23	the	the	DET
fuelectenerg-1260	247	24	intended	intend	VERB
fuelectenerg-1260	247	25	ones	one	NOUN
fuelectenerg-1260	247	26	for	for	ADP
fuelectenerg-1260	247	27	regular	regular	ADJ
fuelectenerg-1260	247	28	fabrication	fabrication	NOUN
fuelectenerg-1260	247	29	.	.	PUNCT
fuelectenerg-1260	248	1	however	however	ADV
fuelectenerg-1260	248	2	,	,	PUNCT
fuelectenerg-1260	248	3	the	the	PRON
fuelectenerg-1260	248	4	closer	close	ADJ
fuelectenerg-1260	248	5	to	to	ADP
fuelectenerg-1260	248	6	the	the	DET
fuelectenerg-1260	248	7	reality	reality	NOUN
fuelectenerg-1260	248	8	,	,	PUNCT
fuelectenerg-1260	248	9	the	the	DET
fuelectenerg-1260	248	10	better	well	ADJ
fuelectenerg-1260	248	11	is	be	AUX
fuelectenerg-1260	248	12	the	the	DET
fuelectenerg-1260	248	13	prototype	prototype	NOUN
fuelectenerg-1260	248	14	.	.	PUNCT
fuelectenerg-1260	249	1	if	if	SCONJ
fuelectenerg-1260	249	2	the	the	DET
fuelectenerg-1260	249	3	aim	aim	NOUN
fuelectenerg-1260	249	4	is	be	AUX
fuelectenerg-1260	249	5	to	to	PART
fuelectenerg-1260	249	6	study	study	VERB
fuelectenerg-1260	249	7	the	the	DET
fuelectenerg-1260	249	8	feasibility	feasibility	NOUN
fuelectenerg-1260	249	9	of	of	ADP
fuelectenerg-1260	249	10	a	a	DET
fuelectenerg-1260	249	11	certain	certain	ADJ
fuelectenerg-1260	249	12	production	production	NOUN
fuelectenerg-1260	249	13	process	process	NOUN
fuelectenerg-1260	249	14	,	,	PUNCT
fuelectenerg-1260	249	15	then	then	ADV
fuelectenerg-1260	249	16	the	the	DET
fuelectenerg-1260	249	17	intended	intend	VERB
fuelectenerg-1260	249	18	production	production	NOUN
fuelectenerg-1260	249	19	process	process	NOUN
fuelectenerg-1260	249	20	must	must	AUX
fuelectenerg-1260	249	21	be	be	AUX
fuelectenerg-1260	249	22	replicated	replicate	VERB
fuelectenerg-1260	249	23	.	.	PUNCT
fuelectenerg-1260	250	1	typically	typically	ADV
fuelectenerg-1260	250	2	this	this	PRON
fuelectenerg-1260	250	3	is	be	AUX
fuelectenerg-1260	250	4	a	a	DET
fuelectenerg-1260	250	5	“	"	PUNCT
fuelectenerg-1260	250	6	no	no	DET
fuelectenerg-1260	250	7	frills	frill	NOUN
fuelectenerg-1260	250	8	”	"	PUNCT
fuelectenerg-1260	250	9	approach	approach	NOUN
fuelectenerg-1260	250	10	aimed	aim	VERB
fuelectenerg-1260	250	11	at	at	ADP
fuelectenerg-1260	250	12	simplification	simplification	NOUN
fuelectenerg-1260	250	13	,	,	PUNCT
fuelectenerg-1260	250	14	be	be	AUX
fuelectenerg-1260	250	15	it	it	PRON
fuelectenerg-1260	250	16	reduction	reduction	NOUN
fuelectenerg-1260	250	17	in	in	ADP
fuelectenerg-1260	250	18	fabrication	fabrication	NOUN
fuelectenerg-1260	250	19	time	time	NOUN
fuelectenerg-1260	250	20	or	or	CCONJ
fuelectenerg-1260	250	21	cost	cost	NOUN
fuelectenerg-1260	250	22	of	of	ADP
fuelectenerg-1260	250	23	materials	material	NOUN
fuelectenerg-1260	250	24	or	or	CCONJ
fuelectenerg-1260	250	25	need	need	NOUN
fuelectenerg-1260	250	26	of	of	ADP
fuelectenerg-1260	250	27	expensive	expensive	ADJ
fuelectenerg-1260	250	28	equipment	equipment	NOUN
fuelectenerg-1260	250	29	.	.	PUNCT
fuelectenerg-1260	251	1	prototyping	prototyping	NOUN
fuelectenerg-1260	251	2	is	be	AUX
fuelectenerg-1260	251	3	aimed	aim	VERB
fuelectenerg-1260	251	4	at	at	ADP
fuelectenerg-1260	251	5	answering	answer	VERB
fuelectenerg-1260	251	6	the	the	DET
fuelectenerg-1260	251	7	question	question	NOUN
fuelectenerg-1260	251	8	“	"	PUNCT
fuelectenerg-1260	251	9	can	can	AUX
fuelectenerg-1260	251	10	it	it	PRON
fuelectenerg-1260	251	11	be	be	AUX
fuelectenerg-1260	251	12	done	do	VERB
fuelectenerg-1260	251	13	”	"	PUNCT
fuelectenerg-1260	251	14	and	and	CCONJ
fuelectenerg-1260	251	15	“	"	PUNCT
fuelectenerg-1260	251	16	does	do	AUX
fuelectenerg-1260	251	17	it	it	PRON
fuelectenerg-1260	251	18	do	do	VERB
fuelectenerg-1260	251	19	what	what	PRON
fuelectenerg-1260	251	20	it	it	PRON
fuelectenerg-1260	251	21	is	be	AUX
fuelectenerg-1260	251	22	meant	mean	VERB
fuelectenerg-1260	251	23	to	to	PART
fuelectenerg-1260	251	24	do	do	VERB
fuelectenerg-1260	251	25	”	"	PUNCT
fuelectenerg-1260	251	26	.	.	PUNCT
fuelectenerg-1260	252	1	the	the	DET
fuelectenerg-1260	252	2	answer	answer	NOUN
fuelectenerg-1260	252	3	must	must	AUX
fuelectenerg-1260	252	4	be	be	AUX
fuelectenerg-1260	252	5	fast	fast	ADJ
fuelectenerg-1260	252	6	,	,	PUNCT
fuelectenerg-1260	252	7	before	before	SCONJ
fuelectenerg-1260	252	8	large	large	ADJ
fuelectenerg-1260	252	9	sums	sum	NOUN
fuelectenerg-1260	252	10	are	be	AUX
fuelectenerg-1260	252	11	invested	invest	VERB
fuelectenerg-1260	252	12	in	in	ADP
fuelectenerg-1260	252	13	its	its	PRON
fuelectenerg-1260	252	14	production	production	NOUN
fuelectenerg-1260	252	15	.	.	PUNCT
fuelectenerg-1260	253	1	this	this	PRON
fuelectenerg-1260	253	2	is	be	AUX
fuelectenerg-1260	253	3	why	why	SCONJ
fuelectenerg-1260	253	4	rapid	rapid	ADJ
fuelectenerg-1260	253	5	prototyping	prototyping	NOUN
fuelectenerg-1260	253	6	has	have	AUX
fuelectenerg-1260	253	7	evolved	evolve	VERB
fuelectenerg-1260	253	8	over	over	ADP
fuelectenerg-1260	253	9	the	the	DET
fuelectenerg-1260	253	10	years	year	NOUN
fuelectenerg-1260	253	11	.	.	PUNCT
fuelectenerg-1260	254	1	even	even	ADV
fuelectenerg-1260	254	2	rapid	rapid	ADJ
fuelectenerg-1260	254	3	prototyping	prototyping	NOUN
fuelectenerg-1260	254	4	requires	require	VERB
fuelectenerg-1260	254	5	to	to	ADP
fuelectenerg-1260	254	6	some	some	DET
fuelectenerg-1260	254	7	extent	extent	NOUN
fuelectenerg-1260	254	8	a	a	DET
fuelectenerg-1260	254	9	worked	work	VERB
fuelectenerg-1260	254	10	out	out	ADP
fuelectenerg-1260	254	11	design	design	NOUN
fuelectenerg-1260	254	12	.	.	PUNCT
fuelectenerg-1260	255	1	a	a	DET
fuelectenerg-1260	255	2	prototype	prototype	NOUN
fuelectenerg-1260	255	3	serves	serve	VERB
fuelectenerg-1260	255	4	to	to	PART
fuelectenerg-1260	255	5	eliminate	eliminate	VERB
fuelectenerg-1260	255	6	design	design	NOUN
fuelectenerg-1260	255	7	flaws	flaw	NOUN
fuelectenerg-1260	255	8	or	or	CCONJ
fuelectenerg-1260	255	9	unnecessary	unnecessary	ADJ
fuelectenerg-1260	255	10	costs	cost	NOUN
fuelectenerg-1260	255	11	early	early	ADV
fuelectenerg-1260	255	12	on	on	ADV
fuelectenerg-1260	255	13	.	.	PUNCT
fuelectenerg-1260	256	1	the	the	DET
fuelectenerg-1260	256	2	“	"	PUNCT
fuelectenerg-1260	256	3	no	no	DET
fuelectenerg-1260	256	4	frills	frill	NOUN
fuelectenerg-1260	256	5	”	"	PUNCT
fuelectenerg-1260	256	6	means	mean	VERB
fuelectenerg-1260	256	7	that	that	SCONJ
fuelectenerg-1260	256	8	the	the	DET
fuelectenerg-1260	256	9	focus	focus	NOUN
fuelectenerg-1260	256	10	is	be	AUX
fuelectenerg-1260	256	11	on	on	ADP
fuelectenerg-1260	256	12	the	the	DET
fuelectenerg-1260	256	13	functioning	functioning	NOUN
fuelectenerg-1260	256	14	of	of	ADP
fuelectenerg-1260	256	15	a	a	DET
fuelectenerg-1260	256	16	device	device	NOUN
fuelectenerg-1260	256	17	for	for	ADP
fuelectenerg-1260	256	18	its	its	PRON
fuelectenerg-1260	256	19	intended	intended	ADJ
fuelectenerg-1260	256	20	purpose	purpose	NOUN
fuelectenerg-1260	256	21	,	,	PUNCT
fuelectenerg-1260	256	22	the	the	DET
fuelectenerg-1260	256	23	famous	famous	ADJ
fuelectenerg-1260	256	24	“	"	PUNCT
fuelectenerg-1260	256	25	fit	fit	NOUN
fuelectenerg-1260	256	26	for	for	ADP
fuelectenerg-1260	256	27	that	that	DET
fuelectenerg-1260	256	28	purpose	purpose	NOUN
fuelectenerg-1260	256	29	”	"	PUNCT
fuelectenerg-1260	256	30	.	.	PUNCT
fuelectenerg-1260	257	1	as	as	ADP
fuelectenerg-1260	257	2	an	an	DET
fuelectenerg-1260	257	3	analogy	analogy	NOUN
fuelectenerg-1260	257	4	,	,	PUNCT
fuelectenerg-1260	257	5	there	there	PRON
fuelectenerg-1260	257	6	is	be	VERB
fuelectenerg-1260	257	7	no	no	DET
fuelectenerg-1260	257	8	point	point	NOUN
fuelectenerg-1260	257	9	in	in	ADP
fuelectenerg-1260	257	10	modelling	model	VERB
fuelectenerg-1260	257	11	comfortable	comfortable	ADJ
fuelectenerg-1260	257	12	seats	seat	NOUN
fuelectenerg-1260	257	13	for	for	ADP
fuelectenerg-1260	257	14	an	an	DET
fuelectenerg-1260	257	15	airplane	airplane	NOUN
fuelectenerg-1260	257	16	that	that	PRON
fuelectenerg-1260	257	17	is	be	AUX
fuelectenerg-1260	257	18	unable	unable	ADJ
fuelectenerg-1260	257	19	to	to	PART
fuelectenerg-1260	257	20	take	take	VERB
fuelectenerg-1260	257	21	off	off	ADP
fuelectenerg-1260	257	22	and	and	CCONJ
fuelectenerg-1260	257	23	fly	fly	VERB
fuelectenerg-1260	257	24	.	.	PUNCT
fuelectenerg-1260	258	1	it	it	PRON
fuelectenerg-1260	258	2	must	must	AUX
fuelectenerg-1260	258	3	fly	fly	VERB
fuelectenerg-1260	258	4	!	!	PUNCT
fuelectenerg-1260	259	1	that	that	PRON
fuelectenerg-1260	259	2	is	be	AUX
fuelectenerg-1260	259	3	its	its	PRON
fuelectenerg-1260	259	4	purpose	purpose	NOUN
fuelectenerg-1260	259	5	.	.	PUNCT
fuelectenerg-1260	260	1	it	it	PRON
fuelectenerg-1260	260	2	was	be	AUX
fuelectenerg-1260	260	3	the	the	DET
fuelectenerg-1260	260	4	search	search	NOUN
fuelectenerg-1260	260	5	for	for	ADP
fuelectenerg-1260	260	6	faster	fast	ADJ
fuelectenerg-1260	260	7	,	,	PUNCT
fuelectenerg-1260	260	8	cheaper	cheap	ADJ
fuelectenerg-1260	260	9	prototyping	prototyping	NOUN
fuelectenerg-1260	260	10	that	that	PRON
fuelectenerg-1260	260	11	enabled	enable	VERB
fuelectenerg-1260	260	12	the	the	DET
fuelectenerg-1260	260	13	evolution	evolution	NOUN
fuelectenerg-1260	260	14	of	of	ADP
fuelectenerg-1260	260	15	mems	mem	NOUN
fuelectenerg-1260	260	16	from	from	ADP
fuelectenerg-1260	260	17	silicon	silicon	NOUN
fuelectenerg-1260	260	18	manufacturing	manufacturing	NOUN
fuelectenerg-1260	260	19	to	to	ADP
fuelectenerg-1260	260	20	other	other	ADJ
fuelectenerg-1260	260	21	materials	material	NOUN
fuelectenerg-1260	260	22	and	and	CCONJ
fuelectenerg-1260	260	23	processes	process	NOUN
fuelectenerg-1260	260	24	.	.	PUNCT
fuelectenerg-1260	261	1	this	this	PRON
fuelectenerg-1260	261	2	happens	happen	VERB
fuelectenerg-1260	261	3	when	when	SCONJ
fuelectenerg-1260	261	4	a	a	DET
fuelectenerg-1260	261	5	mems	mem	NOUN
fuelectenerg-1260	261	6	prototype	prototype	NOUN
fuelectenerg-1260	261	7	turns	turn	VERB
fuelectenerg-1260	261	8	out	out	ADP
fuelectenerg-1260	261	9	to	to	PART
fuelectenerg-1260	261	10	be	be	AUX
fuelectenerg-1260	261	11	satisfactory	satisfactory	ADJ
fuelectenerg-1260	261	12	to	to	ADP
fuelectenerg-1260	261	13	the	the	DET
fuelectenerg-1260	261	14	extent	extent	NOUN
fuelectenerg-1260	261	15	that	that	SCONJ
fuelectenerg-1260	261	16	the	the	DET
fuelectenerg-1260	261	17	initial	initial	ADJ
fuelectenerg-1260	261	18	experiment	experiment	NOUN
fuelectenerg-1260	261	19	goes	go	VERB
fuelectenerg-1260	261	20	almost	almost	ADV
fuelectenerg-1260	261	21	instantly	instantly	ADV
fuelectenerg-1260	261	22	into	into	ADP
fuelectenerg-1260	261	23	production	production	NOUN
fuelectenerg-1260	261	24	maturity	maturity	NOUN
fuelectenerg-1260	261	25	.	.	PUNCT
fuelectenerg-1260	262	1	this	this	PRON
fuelectenerg-1260	262	2	is	be	AUX
fuelectenerg-1260	262	3	triggered	trigger	VERB
fuelectenerg-1260	262	4	by	by	ADP
fuelectenerg-1260	262	5	the	the	DET
fuelectenerg-1260	262	6	insight	insight	NOUN
fuelectenerg-1260	262	7	that	that	SCONJ
fuelectenerg-1260	262	8	originally	originally	ADV
fuelectenerg-1260	262	9	intended	intend	VERB
fuelectenerg-1260	262	10	materials	material	NOUN
fuelectenerg-1260	262	11	or	or	CCONJ
fuelectenerg-1260	262	12	the	the	DET
fuelectenerg-1260	262	13	production	production	NOUN
fuelectenerg-1260	262	14	process	process	NOUN
fuelectenerg-1260	262	15	can	can	AUX
fuelectenerg-1260	262	16	be	be	AUX
fuelectenerg-1260	262	17	replaced	replace	VERB
fuelectenerg-1260	262	18	with	with	ADP
fuelectenerg-1260	262	19	the	the	DET
fuelectenerg-1260	262	20	cheaper	cheap	ADJ
fuelectenerg-1260	262	21	ones	one	NOUN
fuelectenerg-1260	262	22	used	use	VERB
fuelectenerg-1260	262	23	in	in	ADP
fuelectenerg-1260	262	24	the	the	DET
fuelectenerg-1260	262	25	prototype	prototype	NOUN
fuelectenerg-1260	262	26	.	.	PUNCT
fuelectenerg-1260	263	1	this	this	PRON
fuelectenerg-1260	263	2	has	have	AUX
fuelectenerg-1260	263	3	lead	lead	VERB
fuelectenerg-1260	263	4	to	to	ADP
fuelectenerg-1260	263	5	an	an	DET
fuelectenerg-1260	263	6	explosion	explosion	NOUN
fuelectenerg-1260	263	7	of	of	ADP
fuelectenerg-1260	263	8	alternative	alternative	ADJ
fuelectenerg-1260	263	9	mems	mem	NOUN
fuelectenerg-1260	263	10	materials	material	NOUN
fuelectenerg-1260	263	11	and	and	CCONJ
fuelectenerg-1260	263	12	technologies	technology	NOUN
fuelectenerg-1260	263	13	,	,	PUNCT
fuelectenerg-1260	263	14	and	and	CCONJ
fuelectenerg-1260	263	15	with	with	ADP
fuelectenerg-1260	263	16	it	it	PRON
fuelectenerg-1260	263	17	pushing	push	VERB
fuelectenerg-1260	263	18	innovations	innovation	NOUN
fuelectenerg-1260	263	19	and	and	CCONJ
fuelectenerg-1260	263	20	applications	application	NOUN
fuelectenerg-1260	263	21	further	far	ADV
fuelectenerg-1260	263	22	from	from	ADP
fuelectenerg-1260	263	23	initially	initially	ADV
fuelectenerg-1260	263	24	expensive	expensive	ADJ
fuelectenerg-1260	263	25	devices	device	NOUN
fuelectenerg-1260	263	26	to	to	ADP
fuelectenerg-1260	263	27	cheap	cheap	ADJ
fuelectenerg-1260	263	28	single	single	ADJ
fuelectenerg-1260	263	29	use	use	NOUN
fuelectenerg-1260	263	30	medical	medical	ADJ
fuelectenerg-1260	263	31	mems	mem	NOUN
fuelectenerg-1260	263	32	products	product	NOUN
fuelectenerg-1260	263	33	.	.	PUNCT
fuelectenerg-1260	264	1	in	in	ADP
fuelectenerg-1260	264	2	what	what	PRON
fuelectenerg-1260	264	3	follows	follow	VERB
fuelectenerg-1260	264	4	,	,	PUNCT
fuelectenerg-1260	264	5	we	we	PRON
fuelectenerg-1260	264	6	will	will	AUX
fuelectenerg-1260	264	7	illustrate	illustrate	VERB
fuelectenerg-1260	264	8	this	this	PRON
fuelectenerg-1260	264	9	with	with	ADP
fuelectenerg-1260	264	10	selected	select	VERB
fuelectenerg-1260	264	11	examples	example	NOUN
fuelectenerg-1260	264	12	in	in	ADP
fuelectenerg-1260	264	13	a	a	DET
fuelectenerg-1260	264	14	brief	brief	ADJ
fuelectenerg-1260	264	15	journey	journey	NOUN
fuelectenerg-1260	264	16	in	in	ADP
fuelectenerg-1260	264	17	time	time	NOUN
fuelectenerg-1260	264	18	.	.	PUNCT
fuelectenerg-1260	265	1	in	in	ADP
fuelectenerg-1260	265	2	the	the	DET
fuelectenerg-1260	265	3	process	process	NOUN
fuelectenerg-1260	265	4	of	of	ADP
fuelectenerg-1260	265	5	rapid	rapid	ADJ
fuelectenerg-1260	265	6	prototyping	prototyping	NOUN
fuelectenerg-1260	265	7	sometimes	sometimes	ADV
fuelectenerg-1260	265	8	specific	specific	ADJ
fuelectenerg-1260	265	9	tools	tool	NOUN
fuelectenerg-1260	265	10	are	be	AUX
fuelectenerg-1260	265	11	required	require	VERB
fuelectenerg-1260	265	12	for	for	ADP
fuelectenerg-1260	265	13	being	be	AUX
fuelectenerg-1260	265	14	able	able	ADJ
fuelectenerg-1260	265	15	to	to	PART
fuelectenerg-1260	265	16	see	see	VERB
fuelectenerg-1260	265	17	small	small	ADJ
fuelectenerg-1260	265	18	structures	structure	NOUN
fuelectenerg-1260	265	19	in	in	ADP
fuelectenerg-1260	265	20	mems	mem	NOUN
fuelectenerg-1260	265	21	.	.	PUNCT
fuelectenerg-1260	266	1	one	one	NUM
fuelectenerg-1260	266	2	such	such	ADJ
fuelectenerg-1260	266	3	tool	tool	NOUN
fuelectenerg-1260	266	4	is	be	AUX
fuelectenerg-1260	266	5	“	"	PUNCT
fuelectenerg-1260	266	6	small	small	ADJ
fuelectenerg-1260	266	7	spot	spot	NOUN
fuelectenerg-1260	266	8	”	"	PUNCT
fuelectenerg-1260	266	9	stereolithography	stereolithography	NOUN
fuelectenerg-1260	266	10	but	but	CCONJ
fuelectenerg-1260	266	11	it	it	PRON
fuelectenerg-1260	266	12	was	be	AUX
fuelectenerg-1260	266	13	insufficient	insufficient	ADJ
fuelectenerg-1260	266	14	for	for	ADP
fuelectenerg-1260	266	15	small	small	ADJ
fuelectenerg-1260	266	16	structures	structure	NOUN
fuelectenerg-1260	266	17	,	,	PUNCT
fuelectenerg-1260	266	18	and	and	CCONJ
fuelectenerg-1260	266	19	being	be	AUX
fuelectenerg-1260	266	20	replaced	replace	VERB
fuelectenerg-1260	266	21	by	by	ADP
fuelectenerg-1260	266	22	microstereolithography	microstereolithography	NOUN
fuelectenerg-1260	266	23	,	,	PUNCT
fuelectenerg-1260	266	24	which	which	PRON
fuelectenerg-1260	266	25	was	be	AUX
fuelectenerg-1260	266	26	not	not	PART
fuelectenerg-1260	266	27	yet	yet	ADV
fuelectenerg-1260	266	28	fully	fully	ADV
fuelectenerg-1260	266	29	developed	develop	VERB
fuelectenerg-1260	266	30	.	.	PUNCT
fuelectenerg-1260	267	1	bertsch	bertsch	PROPN
fuelectenerg-1260	267	2	et	et	PROPN
fuelectenerg-1260	268	1	al	al	PROPN
fuelectenerg-1260	268	2	.	.	PROPN
fuelectenerg-1260	268	3	have	have	AUX
fuelectenerg-1260	268	4	[	[	X
fuelectenerg-1260	268	5	55	55	NUM
fuelectenerg-1260	268	6	]	]	PUNCT
fuelectenerg-1260	268	7	conducted	conduct	VERB
fuelectenerg-1260	268	8	a	a	DET
fuelectenerg-1260	268	9	comparative	comparative	ADJ
fuelectenerg-1260	268	10	analysis	analysis	NOUN
fuelectenerg-1260	268	11	of	of	ADP
fuelectenerg-1260	268	12	those	those	DET
fuelectenerg-1260	268	13	different	different	ADJ
fuelectenerg-1260	268	14	types	type	NOUN
fuelectenerg-1260	268	15	of	of	ADP
fuelectenerg-1260	268	16	stereolithography	stereolithography	NOUN
fuelectenerg-1260	268	17	and	and	CCONJ
fuelectenerg-1260	268	18	their	their	PRON
fuelectenerg-1260	268	19	suitability	suitability	NOUN
fuelectenerg-1260	268	20	in	in	ADP
fuelectenerg-1260	268	21	mems	mem	NOUN
fuelectenerg-1260	268	22	prototyping	prototyping	NOUN
fuelectenerg-1260	268	23	.	.	PUNCT
fuelectenerg-1260	269	1	conventional	conventional	ADJ
fuelectenerg-1260	269	2	stereolithography	stereolithography	NOUN
fuelectenerg-1260	269	3	’s	’s	PART
fuelectenerg-1260	269	4	resolution	resolution	NOUN
fuelectenerg-1260	269	5	was	be	AUX
fuelectenerg-1260	269	6	too	too	ADV
fuelectenerg-1260	269	7	limited	limited	ADJ
fuelectenerg-1260	269	8	for	for	ADP
fuelectenerg-1260	269	9	small	small	ADJ
fuelectenerg-1260	269	10	mems	mem	NOUN
fuelectenerg-1260	269	11	structures	structure	NOUN
fuelectenerg-1260	269	12	.	.	PUNCT
fuelectenerg-1260	270	1	however	however	ADV
fuelectenerg-1260	270	2	,	,	PUNCT
fuelectenerg-1260	270	3	a	a	DET
fuelectenerg-1260	270	4	later	later	ADV
fuelectenerg-1260	270	5	integral	integral	ADJ
fuelectenerg-1260	270	6	microstereolithography	microstereolithography	NOUN
fuelectenerg-1260	270	7	’s	’s	PART
fuelectenerg-1260	270	8	resolution	resolution	NOUN
fuelectenerg-1260	270	9	with	with	ADP
fuelectenerg-1260	270	10	at	at	ADP
fuelectenerg-1260	270	11	least	least	ADJ
fuelectenerg-1260	270	12	an	an	DET
fuelectenerg-1260	270	13	order	order	NOUN
fuelectenerg-1260	270	14	of	of	ADP
fuelectenerg-1260	270	15	magnitude	magnitude	NOUN
fuelectenerg-1260	270	16	better	well	ADJ
fuelectenerg-1260	270	17	than	than	ADP
fuelectenerg-1260	270	18	small	small	ADJ
fuelectenerg-1260	270	19	spot	spot	NOUN
fuelectenerg-1260	270	20	lithography	lithography	NOUN
fuelectenerg-1260	270	21	turned	turn	VERB
fuelectenerg-1260	270	22	out	out	ADP
fuelectenerg-1260	270	23	particularly	particularly	ADV
fuelectenerg-1260	270	24	20	20	NUM
fuelectenerg-1260	270	25	r.	r.	PROPN
fuelectenerg-1260	270	26	sitte	sitte	PROPN
fuelectenerg-1260	270	27	suitable	suitable	ADJ
fuelectenerg-1260	270	28	for	for	ADP
fuelectenerg-1260	270	29	manufacturing	manufacture	VERB
fuelectenerg-1260	270	30	complete	complete	ADJ
fuelectenerg-1260	270	31	layers	layer	NOUN
fuelectenerg-1260	270	32	with	with	ADP
fuelectenerg-1260	270	33	small	small	ADJ
fuelectenerg-1260	270	34	3d	3d	PROPN
fuelectenerg-1260	270	35	structures	structure	NOUN
fuelectenerg-1260	270	36	of	of	ADP
fuelectenerg-1260	270	37	0.05	0.05	NUM
fuelectenerg-1260	270	38	to	to	PART
fuelectenerg-1260	270	39	0.2	0.2	NUM
fuelectenerg-1260	270	40	mm	mm	NOUN
fuelectenerg-1260	270	41	but	but	CCONJ
fuelectenerg-1260	270	42	without	without	ADP
fuelectenerg-1260	270	43	high	high	ADJ
fuelectenerg-1260	270	44	aspect	aspect	NOUN
fuelectenerg-1260	270	45	ratio	ratio	NOUN
fuelectenerg-1260	270	46	.	.	PUNCT
fuelectenerg-1260	271	1	lin	lin	PROPN
fuelectenerg-1260	271	2	et	et	PROPN
fuelectenerg-1260	271	3	al	al	PROPN
fuelectenerg-1260	271	4	.	.	PROPN
fuelectenerg-1260	271	5	used	use	VERB
fuelectenerg-1260	271	6	a	a	DET
fuelectenerg-1260	271	7	thin	thin	ADJ
fuelectenerg-1260	271	8	layer	layer	NOUN
fuelectenerg-1260	271	9	of	of	ADP
fuelectenerg-1260	271	10	baked	bake	VERB
fuelectenerg-1260	271	11	on	on	ADP
fuelectenerg-1260	271	12	photoresist	photoresist	NOUN
fuelectenerg-1260	271	13	,	,	PUNCT
fuelectenerg-1260	271	14	instead	instead	ADV
fuelectenerg-1260	271	15	of	of	ADP
fuelectenerg-1260	271	16	a	a	DET
fuelectenerg-1260	271	17	conventional	conventional	ADJ
fuelectenerg-1260	271	18	mask	mask	NOUN
fuelectenerg-1260	271	19	on	on	ADP
fuelectenerg-1260	271	20	soda	soda	NOUN
fuelectenerg-1260	271	21	-	-	PUNCT
fuelectenerg-1260	271	22	lime	lime	NOUN
fuelectenerg-1260	271	23	glass	glass	NOUN
fuelectenerg-1260	271	24	substrates	substrate	NOUN
fuelectenerg-1260	271	25	to	to	PART
fuelectenerg-1260	271	26	produce	produce	VERB
fuelectenerg-1260	271	27	microfluidic	microfluidic	ADJ
fuelectenerg-1260	271	28	channels	channel	NOUN
fuelectenerg-1260	271	29	approximately	approximately	ADV
fuelectenerg-1260	271	30	36	36	NUM
fuelectenerg-1260	271	31	μm	μm	NOUN
fuelectenerg-1260	271	32	deep	deep	ADJ
fuelectenerg-1260	271	33	.	.	PUNCT
fuelectenerg-1260	272	1	a	a	DET
fuelectenerg-1260	272	2	two	two	NUM
fuelectenerg-1260	272	3	-	-	PUNCT
fuelectenerg-1260	272	4	step	step	NOUN
fuelectenerg-1260	272	5	baking	baking	NOUN
fuelectenerg-1260	272	6	process	process	NOUN
fuelectenerg-1260	272	7	ensured	ensure	VERB
fuelectenerg-1260	272	8	good	good	ADJ
fuelectenerg-1260	272	9	adhesion	adhesion	NOUN
fuelectenerg-1260	272	10	of	of	ADP
fuelectenerg-1260	272	11	the	the	DET
fuelectenerg-1260	272	12	photoresist	photoresist	NOUN
fuelectenerg-1260	272	13	to	to	ADP
fuelectenerg-1260	272	14	the	the	DET
fuelectenerg-1260	272	15	glass	glass	NOUN
fuelectenerg-1260	272	16	.	.	PUNCT
fuelectenerg-1260	273	1	this	this	PRON
fuelectenerg-1260	273	2	was	be	AUX
fuelectenerg-1260	273	3	then	then	ADV
fuelectenerg-1260	273	4	etched	etch	VERB
fuelectenerg-1260	273	5	off	off	ADP
fuelectenerg-1260	273	6	in	in	ADP
fuelectenerg-1260	273	7	an	an	DET
fuelectenerg-1260	273	8	iterative	iterative	NOUN
fuelectenerg-1260	273	9	progression	progression	NOUN
fuelectenerg-1260	273	10	of	of	ADP
fuelectenerg-1260	273	11	wet	wet	ADJ
fuelectenerg-1260	273	12	etching	etch	VERB
fuelectenerg-1260	273	13	of	of	ADP
fuelectenerg-1260	273	14	dipping	dip	VERB
fuelectenerg-1260	273	15	and	and	CCONJ
fuelectenerg-1260	273	16	etching	etch	VERB
fuelectenerg-1260	273	17	with	with	ADP
fuelectenerg-1260	273	18	ultrasonic	ultrasonic	ADJ
fuelectenerg-1260	273	19	agitation	agitation	NOUN
fuelectenerg-1260	273	20	,	,	PUNCT
fuelectenerg-1260	273	21	which	which	PRON
fuelectenerg-1260	273	22	led	lead	VERB
fuelectenerg-1260	273	23	to	to	PART
fuelectenerg-1260	273	24	smooth	smooth	VERB
fuelectenerg-1260	273	25	etching	etch	VERB
fuelectenerg-1260	273	26	results	result	NOUN
fuelectenerg-1260	273	27	.	.	PUNCT
fuelectenerg-1260	274	1	the	the	DET
fuelectenerg-1260	274	2	process	process	NOUN
fuelectenerg-1260	274	3	was	be	AUX
fuelectenerg-1260	274	4	aimed	aim	VERB
fuelectenerg-1260	274	5	at	at	ADP
fuelectenerg-1260	274	6	fast	fast	ADJ
fuelectenerg-1260	274	7	prototyping	prototyping	NOUN
fuelectenerg-1260	274	8	and	and	CCONJ
fuelectenerg-1260	274	9	mass	mass	ADJ
fuelectenerg-1260	274	10	production	production	NOUN
fuelectenerg-1260	274	11	of	of	ADP
fuelectenerg-1260	274	12	microfluidic	microfluidic	ADJ
fuelectenerg-1260	274	13	systems	system	NOUN
fuelectenerg-1260	274	14	.	.	PUNCT
fuelectenerg-1260	275	1	after	after	ADP
fuelectenerg-1260	275	2	successful	successful	ADJ
fuelectenerg-1260	275	3	etching	etching	NOUN
fuelectenerg-1260	275	4	,	,	PUNCT
fuelectenerg-1260	275	5	the	the	DET
fuelectenerg-1260	275	6	microfluidic	microfluidic	ADJ
fuelectenerg-1260	275	7	channels	channel	NOUN
fuelectenerg-1260	275	8	were	be	AUX
fuelectenerg-1260	275	9	sealed	seal	VERB
fuelectenerg-1260	275	10	with	with	ADP
fuelectenerg-1260	275	11	glass	glass	NOUN
fuelectenerg-1260	275	12	chips	chip	NOUN
fuelectenerg-1260	275	13	at	at	ADP
fuelectenerg-1260	275	14	580oc	580oc	PROPN
fuelectenerg-1260	275	15	.	.	PUNCT
fuelectenerg-1260	276	1	the	the	DET
fuelectenerg-1260	276	2	whole	whole	ADJ
fuelectenerg-1260	276	3	process	process	NOUN
fuelectenerg-1260	276	4	was	be	AUX
fuelectenerg-1260	276	5	done	do	VERB
fuelectenerg-1260	276	6	in	in	ADP
fuelectenerg-1260	276	7	ten	ten	NUM
fuelectenerg-1260	276	8	hours	hour	NOUN
fuelectenerg-1260	276	9	[	[	X
fuelectenerg-1260	276	10	56	56	NUM
fuelectenerg-1260	276	11	]	]	PUNCT
fuelectenerg-1260	276	12	.	.	PUNCT
fuelectenerg-1260	277	1	another	another	DET
fuelectenerg-1260	277	2	similar	similar	ADJ
fuelectenerg-1260	277	3	technique	technique	NOUN
fuelectenerg-1260	277	4	using	use	VERB
fuelectenerg-1260	277	5	photoresist	photoresist	NOUN
fuelectenerg-1260	277	6	as	as	SCONJ
fuelectenerg-1260	277	7	was	be	AUX
fuelectenerg-1260	277	8	developed	develop	VERB
fuelectenerg-1260	277	9	by	by	ADP
fuelectenerg-1260	277	10	sampath	sampath	PROPN
fuelectenerg-1260	277	11	et	et	PROPN
fuelectenerg-1260	277	12	al	al	PROPN
fuelectenerg-1260	277	13	.	.	PUNCT
fuelectenerg-1260	278	1	[	[	X
fuelectenerg-1260	278	2	57	57	NUM
fuelectenerg-1260	278	3	]	]	PUNCT
fuelectenerg-1260	278	4	to	to	PART
fuelectenerg-1260	278	5	produce	produce	VERB
fuelectenerg-1260	278	6	free	free	ADJ
fuelectenerg-1260	278	7	moving	moving	NOUN
fuelectenerg-1260	278	8	structures	structure	NOUN
fuelectenerg-1260	278	9	.	.	PUNCT
fuelectenerg-1260	279	1	the	the	DET
fuelectenerg-1260	279	2	authors	author	NOUN
fuelectenerg-1260	279	3	use	use	VERB
fuelectenerg-1260	279	4	a	a	DET
fuelectenerg-1260	279	5	20	20	NUM
fuelectenerg-1260	279	6	m	m	PROPN
fuelectenerg-1260	279	7	layer	layer	NOUN
fuelectenerg-1260	279	8	of	of	ADP
fuelectenerg-1260	279	9	patterned	pattern	VERB
fuelectenerg-1260	279	10	photoresist	photoresist	NOUN
fuelectenerg-1260	279	11	(	(	PUNCT
fuelectenerg-1260	279	12	su-8	su-8	NOUN
fuelectenerg-1260	279	13	)	)	PUNCT
fuelectenerg-1260	279	14	to	to	PART
fuelectenerg-1260	279	15	form	form	VERB
fuelectenerg-1260	279	16	an	an	DET
fuelectenerg-1260	279	17	insulating	insulate	VERB
fuelectenerg-1260	279	18	spacer	spacer	NOUN
fuelectenerg-1260	279	19	layer	layer	NOUN
fuelectenerg-1260	279	20	on	on	ADP
fuelectenerg-1260	279	21	a	a	DET
fuelectenerg-1260	279	22	silicon	silicon	NOUN
fuelectenerg-1260	279	23	wafer	wafer	NOUN
fuelectenerg-1260	279	24	.	.	PUNCT
fuelectenerg-1260	280	1	then	then	ADV
fuelectenerg-1260	280	2	they	they	PRON
fuelectenerg-1260	280	3	used	use	VERB
fuelectenerg-1260	280	4	wafer	wafer	NOUN
fuelectenerg-1260	280	5	bonding	bonding	NOUN
fuelectenerg-1260	280	6	to	to	PART
fuelectenerg-1260	280	7	apply	apply	VERB
fuelectenerg-1260	280	8	a	a	DET
fuelectenerg-1260	280	9	50	50	NUM
fuelectenerg-1260	280	10	m	m	PROPN
fuelectenerg-1260	280	11	layer	layer	NOUN
fuelectenerg-1260	280	12	of	of	ADP
fuelectenerg-1260	280	13	crystal	crystal	NOUN
fuelectenerg-1260	280	14	silicon	silicon	NOUN
fuelectenerg-1260	280	15	on	on	ADP
fuelectenerg-1260	280	16	top	top	NOUN
fuelectenerg-1260	280	17	of	of	ADP
fuelectenerg-1260	280	18	the	the	DET
fuelectenerg-1260	280	19	insulating	insulate	VERB
fuelectenerg-1260	280	20	spacer	spacer	NOUN
fuelectenerg-1260	280	21	.	.	PUNCT
fuelectenerg-1260	281	1	this	this	PRON
fuelectenerg-1260	281	2	was	be	AUX
fuelectenerg-1260	281	3	followed	follow	VERB
fuelectenerg-1260	281	4	by	by	ADP
fuelectenerg-1260	281	5	patterning	pattern	VERB
fuelectenerg-1260	281	6	the	the	DET
fuelectenerg-1260	281	7	crystal	crystal	NOUN
fuelectenerg-1260	281	8	silicon	silicon	NOUN
fuelectenerg-1260	281	9	layer	layer	NOUN
fuelectenerg-1260	281	10	with	with	ADP
fuelectenerg-1260	281	11	rie	rie	NOUN
fuelectenerg-1260	281	12	to	to	PART
fuelectenerg-1260	281	13	produce	produce	VERB
fuelectenerg-1260	281	14	the	the	DET
fuelectenerg-1260	281	15	desired	desire	VERB
fuelectenerg-1260	281	16	structures	structure	NOUN
fuelectenerg-1260	281	17	,	,	PUNCT
fuelectenerg-1260	281	18	in	in	ADP
fuelectenerg-1260	281	19	this	this	DET
fuelectenerg-1260	281	20	case	case	NOUN
fuelectenerg-1260	281	21	,	,	PUNCT
fuelectenerg-1260	281	22	a	a	DET
fuelectenerg-1260	281	23	spring	spring	NOUN
fuelectenerg-1260	281	24	and	and	CCONJ
fuelectenerg-1260	281	25	a	a	DET
fuelectenerg-1260	281	26	piston	piston	NOUN
fuelectenerg-1260	281	27	.	.	PUNCT
fuelectenerg-1260	282	1	the	the	DET
fuelectenerg-1260	282	2	difficulty	difficulty	NOUN
fuelectenerg-1260	282	3	was	be	AUX
fuelectenerg-1260	282	4	to	to	PART
fuelectenerg-1260	282	5	achieve	achieve	VERB
fuelectenerg-1260	282	6	a	a	DET
fuelectenerg-1260	282	7	tight	tight	ADJ
fuelectenerg-1260	282	8	bond	bond	NOUN
fuelectenerg-1260	282	9	between	between	ADP
fuelectenerg-1260	282	10	the	the	DET
fuelectenerg-1260	282	11	photoresist	photoresist	NOUN
fuelectenerg-1260	282	12	and	and	CCONJ
fuelectenerg-1260	282	13	the	the	DET
fuelectenerg-1260	282	14	crystal	crystal	NOUN
fuelectenerg-1260	282	15	silicon	silicon	NOUN
fuelectenerg-1260	282	16	layer	layer	NOUN
fuelectenerg-1260	282	17	,	,	PUNCT
fuelectenerg-1260	282	18	given	give	VERB
fuelectenerg-1260	282	19	that	that	SCONJ
fuelectenerg-1260	282	20	the	the	DET
fuelectenerg-1260	282	21	thickness	thickness	NOUN
fuelectenerg-1260	282	22	of	of	ADP
fuelectenerg-1260	282	23	the	the	DET
fuelectenerg-1260	282	24	photoresist	photoresist	NOUN
fuelectenerg-1260	282	25	is	be	AUX
fuelectenerg-1260	282	26	critical	critical	ADJ
fuelectenerg-1260	282	27	to	to	PART
fuelectenerg-1260	282	28	produce	produce	VERB
fuelectenerg-1260	282	29	precisely	precisely	ADV
fuelectenerg-1260	282	30	the	the	DET
fuelectenerg-1260	282	31	desired	desire	VERB
fuelectenerg-1260	282	32	thickness	thickness	NOUN
fuelectenerg-1260	282	33	but	but	CCONJ
fuelectenerg-1260	282	34	it	it	PRON
fuelectenerg-1260	282	35	is	be	AUX
fuelectenerg-1260	282	36	thermally	thermally	ADV
fuelectenerg-1260	282	37	sensitive	sensitive	ADJ
fuelectenerg-1260	282	38	and	and	CCONJ
fuelectenerg-1260	282	39	can	can	AUX
fuelectenerg-1260	282	40	crack	crack	VERB
fuelectenerg-1260	282	41	in	in	ADP
fuelectenerg-1260	282	42	the	the	DET
fuelectenerg-1260	282	43	silicon	silicon	NOUN
fuelectenerg-1260	282	44	patterning	pattern	VERB
fuelectenerg-1260	282	45	processing	processing	NOUN
fuelectenerg-1260	282	46	steps	step	NOUN
fuelectenerg-1260	282	47	.	.	PUNCT
fuelectenerg-1260	283	1	in	in	ADP
fuelectenerg-1260	283	2	mems	mem	NOUN
fuelectenerg-1260	283	3	manufacturing	manufacturing	NOUN
fuelectenerg-1260	283	4	and	and	CCONJ
fuelectenerg-1260	283	5	prototyping	prototyping	NOUN
fuelectenerg-1260	283	6	we	we	PRON
fuelectenerg-1260	283	7	often	often	ADV
fuelectenerg-1260	283	8	see	see	VERB
fuelectenerg-1260	283	9	additive	additive	NOUN
fuelectenerg-1260	283	10	(	(	PUNCT
fuelectenerg-1260	283	11	building	build	VERB
fuelectenerg-1260	283	12	up	up	ADP
fuelectenerg-1260	283	13	in	in	ADP
fuelectenerg-1260	283	14	layers	layer	NOUN
fuelectenerg-1260	283	15	)	)	PUNCT
fuelectenerg-1260	283	16	and	and	CCONJ
fuelectenerg-1260	283	17	subtractive	subtractive	NOUN
fuelectenerg-1260	283	18	(	(	PUNCT
fuelectenerg-1260	283	19	removal	removal	NOUN
fuelectenerg-1260	283	20	of	of	ADP
fuelectenerg-1260	283	21	material	material	NOUN
fuelectenerg-1260	283	22	)	)	PUNCT
fuelectenerg-1260	283	23	processing	processing	NOUN
fuelectenerg-1260	283	24	steps	step	NOUN
fuelectenerg-1260	283	25	to	to	PART
fuelectenerg-1260	283	26	achieve	achieve	VERB
fuelectenerg-1260	283	27	the	the	DET
fuelectenerg-1260	283	28	desired	desire	VERB
fuelectenerg-1260	283	29	structures	structure	NOUN
fuelectenerg-1260	283	30	.	.	PUNCT
fuelectenerg-1260	284	1	these	these	DET
fuelectenerg-1260	284	2	fabrication	fabrication	NOUN
fuelectenerg-1260	284	3	methods	method	NOUN
fuelectenerg-1260	284	4	allow	allow	VERB
fuelectenerg-1260	284	5	alternative	alternative	ADJ
fuelectenerg-1260	284	6	materials	material	NOUN
fuelectenerg-1260	284	7	,	,	PUNCT
fuelectenerg-1260	284	8	often	often	ADV
fuelectenerg-1260	284	9	polymers	polymer	NOUN
fuelectenerg-1260	284	10	and	and	CCONJ
fuelectenerg-1260	284	11	they	they	PRON
fuelectenerg-1260	284	12	do	do	AUX
fuelectenerg-1260	284	13	not	not	PART
fuelectenerg-1260	284	14	need	need	VERB
fuelectenerg-1260	284	15	cleanrooms	cleanroom	NOUN
fuelectenerg-1260	284	16	.	.	PUNCT
fuelectenerg-1260	285	1	they	they	PRON
fuelectenerg-1260	285	2	are	be	AUX
fuelectenerg-1260	285	3	faster	fast	ADJ
fuelectenerg-1260	285	4	,	,	PUNCT
fuelectenerg-1260	285	5	often	often	ADV
fuelectenerg-1260	285	6	cheaper	cheap	ADJ
fuelectenerg-1260	285	7	alternatives	alternative	NOUN
fuelectenerg-1260	285	8	to	to	ADP
fuelectenerg-1260	285	9	the	the	DET
fuelectenerg-1260	285	10	traditional	traditional	ADJ
fuelectenerg-1260	285	11	silicon	silicon	NOUN
fuelectenerg-1260	285	12	wafer	wafer	NOUN
fuelectenerg-1260	285	13	processing	processing	NOUN
fuelectenerg-1260	285	14	.	.	PUNCT
fuelectenerg-1260	286	1	li	li	PROPN
fuelectenerg-1260	286	2	et	et	PROPN
fuelectenerg-1260	286	3	al	al	PROPN
fuelectenerg-1260	286	4	.	.	PROPN
fuelectenerg-1260	286	5	have	have	AUX
fuelectenerg-1260	286	6	adapted	adapt	VERB
fuelectenerg-1260	286	7	shape	shape	NOUN
fuelectenerg-1260	286	8	deposition	deposition	NOUN
fuelectenerg-1260	286	9	manufacturing	manufacturing	NOUN
fuelectenerg-1260	286	10	(	(	PUNCT
fuelectenerg-1260	286	11	sdm	sdm	PROPN
fuelectenerg-1260	286	12	)	)	PUNCT
fuelectenerg-1260	286	13	to	to	PART
fuelectenerg-1260	286	14	microfabrication	microfabrication	NOUN
fuelectenerg-1260	286	15	by	by	ADP
fuelectenerg-1260	286	16	developing	develop	VERB
fuelectenerg-1260	286	17	an	an	DET
fuelectenerg-1260	286	18	ultrasonic	ultrasonic	ADJ
fuelectenerg-1260	286	19	-	-	PUNCT
fuelectenerg-1260	286	20	based	base	VERB
fuelectenerg-1260	286	21	micro	micro	ADJ
fuelectenerg-1260	286	22	powder	powder	NOUN
fuelectenerg-1260	286	23	-	-	PUNCT
fuelectenerg-1260	286	24	feeding	feeding	NOUN
fuelectenerg-1260	286	25	mechanism	mechanism	NOUN
fuelectenerg-1260	286	26	for	for	ADP
fuelectenerg-1260	286	27	precise	precise	ADJ
fuelectenerg-1260	286	28	microdeposition	microdeposition	NOUN
fuelectenerg-1260	286	29	of	of	ADP
fuelectenerg-1260	286	30	dry	dry	ADJ
fuelectenerg-1260	286	31	powder	powder	NOUN
fuelectenerg-1260	286	32	onto	onto	ADP
fuelectenerg-1260	286	33	a	a	DET
fuelectenerg-1260	286	34	substrate	substrate	NOUN
fuelectenerg-1260	286	35	.	.	PUNCT
fuelectenerg-1260	287	1	this	this	PRON
fuelectenerg-1260	287	2	was	be	AUX
fuelectenerg-1260	287	3	followed	follow	VERB
fuelectenerg-1260	287	4	by	by	ADP
fuelectenerg-1260	287	5	patterning	pattern	VERB
fuelectenerg-1260	287	6	by	by	ADP
fuelectenerg-1260	287	7	sintering	sinter	VERB
fuelectenerg-1260	287	8	the	the	DET
fuelectenerg-1260	287	9	powder	powder	NOUN
fuelectenerg-1260	287	10	patterns	pattern	NOUN
fuelectenerg-1260	287	11	with	with	ADP
fuelectenerg-1260	287	12	a	a	DET
fuelectenerg-1260	287	13	micro	micro	ADJ
fuelectenerg-1260	287	14	-	-	ADJ
fuelectenerg-1260	287	15	sized	sized	ADJ
fuelectenerg-1260	287	16	laser	laser	NOUN
fuelectenerg-1260	287	17	beam	beam	NOUN
fuelectenerg-1260	287	18	to	to	PART
fuelectenerg-1260	287	19	clad	clad	VERB
fuelectenerg-1260	287	20	them	they	PRON
fuelectenerg-1260	287	21	onto	onto	ADP
fuelectenerg-1260	287	22	a	a	DET
fuelectenerg-1260	287	23	substrate	substrate	NOUN
fuelectenerg-1260	287	24	[	[	X
fuelectenerg-1260	287	25	58	58	NUM
fuelectenerg-1260	287	26	]	]	PUNCT
fuelectenerg-1260	287	27	.	.	PUNCT
fuelectenerg-1260	288	1	khoury	khoury	PROPN
fuelectenerg-1260	288	2	et	et	PROPN
fuelectenerg-1260	288	3	al	al	PROPN
fuelectenerg-1260	288	4	.	.	PROPN
fuelectenerg-1260	288	5	used	use	VERB
fuelectenerg-1260	288	6	liquid	liquid	NOUN
fuelectenerg-1260	288	7	phase	phase	NOUN
fuelectenerg-1260	288	8	photopolymerization	photopolymerization	NOUN
fuelectenerg-1260	288	9	for	for	ADP
fuelectenerg-1260	288	10	ultra	ultra	ADJ
fuelectenerg-1260	288	11	rapid	rapid	ADJ
fuelectenerg-1260	288	12	prototyping	prototyping	NOUN
fuelectenerg-1260	288	13	that	that	PRON
fuelectenerg-1260	288	14	are	be	AUX
fuelectenerg-1260	288	15	suitable	suitable	ADJ
fuelectenerg-1260	288	16	as	as	ADP
fuelectenerg-1260	288	17	masters	master	NOUN
fuelectenerg-1260	288	18	for	for	ADP
fuelectenerg-1260	288	19	micromoulding	micromoulde	VERB
fuelectenerg-1260	288	20	microfluidic	microfluidic	ADJ
fuelectenerg-1260	288	21	channels	channel	NOUN
fuelectenerg-1260	288	22	.	.	PUNCT
fuelectenerg-1260	289	1	the	the	DET
fuelectenerg-1260	289	2	process	process	NOUN
fuelectenerg-1260	289	3	is	be	AUX
fuelectenerg-1260	289	4	suitable	suitable	ADJ
fuelectenerg-1260	289	5	for	for	ADP
fuelectenerg-1260	289	6	lab	lab	NOUN
fuelectenerg-1260	289	7	on	on	ADP
fuelectenerg-1260	289	8	a	a	DET
fuelectenerg-1260	289	9	chip	chip	NOUN
fuelectenerg-1260	289	10	mems	mem	NOUN
fuelectenerg-1260	289	11	used	use	VERB
fuelectenerg-1260	289	12	in	in	ADP
fuelectenerg-1260	289	13	life	life	NOUN
fuelectenerg-1260	289	14	science	science	NOUN
fuelectenerg-1260	289	15	,	,	PUNCT
fuelectenerg-1260	289	16	where	where	SCONJ
fuelectenerg-1260	289	17	fluids	fluid	NOUN
fuelectenerg-1260	289	18	in	in	ADP
fuelectenerg-1260	289	19	very	very	ADV
fuelectenerg-1260	289	20	small	small	ADJ
fuelectenerg-1260	289	21	quantities	quantity	NOUN
fuelectenerg-1260	289	22	are	be	AUX
fuelectenerg-1260	289	23	used	use	VERB
fuelectenerg-1260	289	24	,	,	PUNCT
fuelectenerg-1260	289	25	mixed	mixed	ADJ
fuelectenerg-1260	289	26	,	,	PUNCT
fuelectenerg-1260	289	27	cultured	cultured	ADJ
fuelectenerg-1260	289	28	,	,	PUNCT
fuelectenerg-1260	289	29	etc	etc	X
fuelectenerg-1260	289	30	.	.	X
fuelectenerg-1260	290	1	and	and	CCONJ
fuelectenerg-1260	290	2	discarded	discard	VERB
fuelectenerg-1260	290	3	.	.	PUNCT
fuelectenerg-1260	291	1	for	for	ADP
fuelectenerg-1260	291	2	the	the	DET
fuelectenerg-1260	291	3	process	process	NOUN
fuelectenerg-1260	291	4	,	,	PUNCT
fuelectenerg-1260	291	5	the	the	DET
fuelectenerg-1260	291	6	authors	author	NOUN
fuelectenerg-1260	291	7	used	use	VERB
fuelectenerg-1260	291	8	a	a	DET
fuelectenerg-1260	291	9	multichannelled	multichannelle	VERB
fuelectenerg-1260	291	10	universal	universal	ADJ
fuelectenerg-1260	291	11	cartridge	cartridge	NOUN
fuelectenerg-1260	291	12	as	as	ADP
fuelectenerg-1260	291	13	master	master	NOUN
fuelectenerg-1260	291	14	.	.	PUNCT
fuelectenerg-1260	292	1	the	the	DET
fuelectenerg-1260	292	2	cartridge	cartridge	NOUN
fuelectenerg-1260	292	3	was	be	AUX
fuelectenerg-1260	292	4	filled	fill	VERB
fuelectenerg-1260	292	5	with	with	ADP
fuelectenerg-1260	292	6	fluid	fluid	ADJ
fuelectenerg-1260	292	7	photoresist	photoresist	NOUN
fuelectenerg-1260	292	8	and	and	CCONJ
fuelectenerg-1260	292	9	unwanted	unwanted	ADJ
fuelectenerg-1260	292	10	parts	part	NOUN
fuelectenerg-1260	292	11	were	be	AUX
fuelectenerg-1260	292	12	masked	mask	VERB
fuelectenerg-1260	292	13	off	off	ADP
fuelectenerg-1260	292	14	before	before	ADP
fuelectenerg-1260	292	15	exposing	expose	VERB
fuelectenerg-1260	292	16	with	with	ADP
fuelectenerg-1260	292	17	uv	uv	NOUN
fuelectenerg-1260	292	18	to	to	PART
fuelectenerg-1260	292	19	harden	harden	VERB
fuelectenerg-1260	292	20	the	the	DET
fuelectenerg-1260	292	21	desired	desire	VERB
fuelectenerg-1260	292	22	channel	channel	NOUN
fuelectenerg-1260	292	23	geometry	geometry	NOUN
fuelectenerg-1260	292	24	.	.	PUNCT
fuelectenerg-1260	293	1	the	the	DET
fuelectenerg-1260	293	2	remaining	remain	VERB
fuelectenerg-1260	293	3	structure	structure	NOUN
fuelectenerg-1260	293	4	was	be	AUX
fuelectenerg-1260	293	5	then	then	ADV
fuelectenerg-1260	293	6	rinsed	rinse	VERB
fuelectenerg-1260	293	7	,	,	PUNCT
fuelectenerg-1260	293	8	leaving	leave	VERB
fuelectenerg-1260	293	9	the	the	DET
fuelectenerg-1260	293	10	desired	desire	VERB
fuelectenerg-1260	293	11	channels	channel	NOUN
fuelectenerg-1260	293	12	open	open	VERB
fuelectenerg-1260	293	13	.	.	PUNCT
fuelectenerg-1260	294	1	the	the	DET
fuelectenerg-1260	294	2	process	process	NOUN
fuelectenerg-1260	294	3	is	be	AUX
fuelectenerg-1260	294	4	also	also	ADV
fuelectenerg-1260	294	5	suitable	suitable	ADJ
fuelectenerg-1260	294	6	for	for	ADP
fuelectenerg-1260	294	7	a	a	DET
fuelectenerg-1260	294	8	fast	fast	ADJ
fuelectenerg-1260	294	9	production	production	NOUN
fuelectenerg-1260	294	10	of	of	ADP
fuelectenerg-1260	294	11	microfluidic	microfluidic	ADJ
fuelectenerg-1260	294	12	devices	device	NOUN
fuelectenerg-1260	294	13	without	without	ADP
fuelectenerg-1260	294	14	micromoulding	micromoulde	VERB
fuelectenerg-1260	294	15	[	[	X
fuelectenerg-1260	294	16	59	59	NUM
fuelectenerg-1260	294	17	]	]	PUNCT
fuelectenerg-1260	294	18	.	.	PUNCT
fuelectenerg-1260	295	1	high	high	ADJ
fuelectenerg-1260	295	2	aspect	aspect	PROPN
fuelectenerg-1260	295	3	ratio	ratio	NOUN
fuelectenerg-1260	295	4	(	(	PUNCT
fuelectenerg-1260	295	5	structures	structure	NOUN
fuelectenerg-1260	295	6	with	with	ADP
fuelectenerg-1260	295	7	deep	deep	ADJ
fuelectenerg-1260	295	8	narrow	narrow	ADJ
fuelectenerg-1260	295	9	trenches	trench	NOUN
fuelectenerg-1260	295	10	with	with	ADP
fuelectenerg-1260	295	11	straight	straight	ADJ
fuelectenerg-1260	295	12	walls	wall	NOUN
fuelectenerg-1260	295	13	)	)	PUNCT
fuelectenerg-1260	295	14	is	be	AUX
fuelectenerg-1260	295	15	a	a	DET
fuelectenerg-1260	295	16	specific	specific	ADJ
fuelectenerg-1260	295	17	niche	niche	NOUN
fuelectenerg-1260	295	18	in	in	ADP
fuelectenerg-1260	295	19	mems	mem	NOUN
fuelectenerg-1260	295	20	.	.	PUNCT
fuelectenerg-1260	296	1	the	the	DET
fuelectenerg-1260	296	2	processes	process	NOUN
fuelectenerg-1260	296	3	that	that	PRON
fuelectenerg-1260	296	4	can	can	AUX
fuelectenerg-1260	296	5	be	be	AUX
fuelectenerg-1260	296	6	used	use	VERB
fuelectenerg-1260	296	7	for	for	ADP
fuelectenerg-1260	296	8	prototyping	prototyping	NOUN
fuelectenerg-1260	296	9	and	and	CCONJ
fuelectenerg-1260	296	10	the	the	DET
fuelectenerg-1260	296	11	production	production	NOUN
fuelectenerg-1260	296	12	of	of	ADP
fuelectenerg-1260	296	13	mems	mem	NOUN
fuelectenerg-1260	296	14	that	that	PRON
fuelectenerg-1260	296	15	require	require	VERB
fuelectenerg-1260	296	16	high	high	ADJ
fuelectenerg-1260	296	17	aspect	aspect	NOUN
fuelectenerg-1260	296	18	ratio	ratio	NOUN
fuelectenerg-1260	296	19	depends	depend	VERB
fuelectenerg-1260	296	20	on	on	ADP
fuelectenerg-1260	296	21	the	the	DET
fuelectenerg-1260	296	22	materials	material	NOUN
fuelectenerg-1260	296	23	used	use	VERB
fuelectenerg-1260	296	24	and	and	CCONJ
fuelectenerg-1260	296	25	consequently	consequently	ADV
fuelectenerg-1260	296	26	the	the	DET
fuelectenerg-1260	296	27	intended	intend	VERB
fuelectenerg-1260	296	28	application	application	NOUN
fuelectenerg-1260	296	29	and	and	CCONJ
fuelectenerg-1260	296	30	life	life	NOUN
fuelectenerg-1260	296	31	span	span	NOUN
fuelectenerg-1260	296	32	of	of	ADP
fuelectenerg-1260	296	33	the	the	DET
fuelectenerg-1260	296	34	mems	mem	NOUN
fuelectenerg-1260	296	35	.	.	PUNCT
fuelectenerg-1260	297	1	sarajlic	sarajlic	PROPN
fuelectenerg-1260	297	2	et	et	PROPN
fuelectenerg-1260	297	3	al	al	PROPN
fuelectenerg-1260	297	4	.	.	PROPN
fuelectenerg-1260	297	5	have	have	AUX
fuelectenerg-1260	297	6	used	use	VERB
fuelectenerg-1260	297	7	plasma	plasma	NOUN
fuelectenerg-1260	297	8	processing	processing	NOUN
fuelectenerg-1260	297	9	with	with	ADP
fuelectenerg-1260	297	10	low	low	ADJ
fuelectenerg-1260	297	11	pressure	pressure	NOUN
fuelectenerg-1260	297	12	chemical	chemical	NOUN
fuelectenerg-1260	297	13	vapour	vapour	NOUN
fuelectenerg-1260	297	14	deposition	deposition	NOUN
fuelectenerg-1260	297	15	(	(	PUNCT
fuelectenerg-1260	297	16	lpcvd	lpcvd	NOUN
fuelectenerg-1260	297	17	)	)	PUNCT
fuelectenerg-1260	297	18	for	for	ADP
fuelectenerg-1260	297	19	high	high	ADJ
fuelectenerg-1260	297	20	aspect	aspect	NOUN
fuelectenerg-1260	297	21	trenches	trench	NOUN
fuelectenerg-1260	297	22	and	and	CCONJ
fuelectenerg-1260	297	23	after	after	ADP
fuelectenerg-1260	297	24	a	a	DET
fuelectenerg-1260	297	25	few	few	ADJ
fuelectenerg-1260	297	26	more	more	ADJ
fuelectenerg-1260	297	27	processing	processing	NOUN
fuelectenerg-1260	297	28	steps	step	NOUN
fuelectenerg-1260	297	29	using	use	VERB
fuelectenerg-1260	297	30	the	the	DET
fuelectenerg-1260	297	31	“	"	PUNCT
fuelectenerg-1260	297	32	black	black	ADJ
fuelectenerg-1260	297	33	silicon	silicon	NOUN
fuelectenerg-1260	297	34	method	method	NOUN
fuelectenerg-1260	297	35	”	"	PUNCT
fuelectenerg-1260	297	36	(	(	PUNCT
fuelectenerg-1260	297	37	bsm	bsm	PROPN
fuelectenerg-1260	297	38	)	)	PUNCT
fuelectenerg-1260	297	39	for	for	ADP
fuelectenerg-1260	297	40	pattering	patter	VERB
fuelectenerg-1260	297	41	,	,	PUNCT
fuelectenerg-1260	297	42	passivating	passivating	NOUN
fuelectenerg-1260	297	43	and	and	CCONJ
fuelectenerg-1260	297	44	release	release	VERB
fuelectenerg-1260	297	45	with	with	ADP
fuelectenerg-1260	297	46	isotropic	isotropic	ADJ
fuelectenerg-1260	297	47	plasma	plasma	NOUN
fuelectenerg-1260	297	48	etching	etch	VERB
fuelectenerg-1260	297	49	[	[	X
fuelectenerg-1260	297	50	60	60	NUM
fuelectenerg-1260	297	51	]	]	PUNCT
fuelectenerg-1260	297	52	.	.	PUNCT
fuelectenerg-1260	298	1	the	the	DET
fuelectenerg-1260	298	2	benefit	benefit	NOUN
fuelectenerg-1260	298	3	is	be	AUX
fuelectenerg-1260	298	4	that	that	SCONJ
fuelectenerg-1260	298	5	the	the	DET
fuelectenerg-1260	298	6	processing	processing	NOUN
fuelectenerg-1260	298	7	was	be	AUX
fuelectenerg-1260	298	8	drastically	drastically	ADV
fuelectenerg-1260	298	9	simplified	simplify	VERB
fuelectenerg-1260	298	10	with	with	ADP
fuelectenerg-1260	298	11	bsm	bsm	NOUN
fuelectenerg-1260	298	12	by	by	ADP
fuelectenerg-1260	298	13	keeping	keep	VERB
fuelectenerg-1260	298	14	all	all	PRON
fuelectenerg-1260	298	15	in	in	ADP
fuelectenerg-1260	298	16	the	the	DET
fuelectenerg-1260	298	17	same	same	ADJ
fuelectenerg-1260	298	18	run	run	NOUN
fuelectenerg-1260	298	19	,	,	PUNCT
fuelectenerg-1260	298	20	that	that	ADV
fuelectenerg-1260	298	21	is	is	ADV
fuelectenerg-1260	298	22	,	,	PUNCT
fuelectenerg-1260	298	23	in	in	ADP
fuelectenerg-1260	298	24	the	the	DET
fuelectenerg-1260	298	25	same	same	ADJ
fuelectenerg-1260	298	26	vacuum	vacuum	NOUN
fuelectenerg-1260	298	27	chamber	chamber	NOUN
fuelectenerg-1260	298	28	.	.	PUNCT
fuelectenerg-1260	299	1	this	this	PRON
fuelectenerg-1260	299	2	made	make	VERB
fuelectenerg-1260	299	3	it	it	PRON
fuelectenerg-1260	299	4	suitable	suitable	ADJ
fuelectenerg-1260	299	5	for	for	ADP
fuelectenerg-1260	299	6	rapid	rapid	ADJ
fuelectenerg-1260	299	7	prototyping	prototyping	NOUN
fuelectenerg-1260	299	8	.	.	PUNCT
fuelectenerg-1260	300	1	in	in	ADP
fuelectenerg-1260	300	2	an	an	DET
fuelectenerg-1260	300	3	endeavour	endeavour	NOUN
fuelectenerg-1260	300	4	for	for	ADP
fuelectenerg-1260	300	5	finding	find	VERB
fuelectenerg-1260	300	6	alternative	alternative	ADJ
fuelectenerg-1260	300	7	micromachining	micromachine	VERB
fuelectenerg-1260	300	8	to	to	PART
fuelectenerg-1260	300	9	produce	produce	VERB
fuelectenerg-1260	300	10	polymer	polymer	NOUN
fuelectenerg-1260	300	11	-	-	PUNCT
fuelectenerg-1260	300	12	based	base	VERB
fuelectenerg-1260	300	13	capacitive	capacitive	PROPN
fuelectenerg-1260	300	14	micro	micro	PROPN
fuelectenerg-1260	300	15	accelerometer	accelerometer	PROPN
fuelectenerg-1260	300	16	yung	yung	PROPN
fuelectenerg-1260	300	17	et	et	PROPN
fuelectenerg-1260	300	18	al	al	PROPN
fuelectenerg-1260	300	19	.	.	PUNCT
fuelectenerg-1260	301	1	[	[	X
fuelectenerg-1260	301	2	61	61	NUM
fuelectenerg-1260	301	3	]	]	PUNCT
fuelectenerg-1260	301	4	have	have	AUX
fuelectenerg-1260	301	5	used	use	VERB
fuelectenerg-1260	301	6	direct	direct	ADJ
fuelectenerg-1260	301	7	write	write	NOUN
fuelectenerg-1260	301	8	laser	laser	NOUN
fuelectenerg-1260	301	9	ablation	ablation	NOUN
fuelectenerg-1260	301	10	(	(	PUNCT
fuelectenerg-1260	301	11	removing	remove	VERB
fuelectenerg-1260	301	12	material	material	NOUN
fuelectenerg-1260	301	13	by	by	ADP
fuelectenerg-1260	301	14	laser	laser	NOUN
fuelectenerg-1260	301	15	sublimation	sublimation	NOUN
fuelectenerg-1260	301	16	)	)	PUNCT
fuelectenerg-1260	301	17	for	for	ADP
fuelectenerg-1260	301	18	its	its	PRON
fuelectenerg-1260	301	19	production	production	NOUN
fuelectenerg-1260	301	20	.	.	PUNCT
fuelectenerg-1260	302	1	they	they	PRON
fuelectenerg-1260	302	2	have	have	AUX
fuelectenerg-1260	302	3	shown	show	VERB
fuelectenerg-1260	302	4	that	that	SCONJ
fuelectenerg-1260	302	5	this	this	PRON
fuelectenerg-1260	302	6	is	be	AUX
fuelectenerg-1260	302	7	a	a	DET
fuelectenerg-1260	302	8	more	more	ADV
fuelectenerg-1260	302	9	convenient	convenient	ADJ
fuelectenerg-1260	302	10	and	and	CCONJ
fuelectenerg-1260	302	11	suitable	suitable	ADJ
fuelectenerg-1260	302	12	technology	technology	NOUN
fuelectenerg-1260	302	13	than	than	ADP
fuelectenerg-1260	302	14	traditional	traditional	ADJ
fuelectenerg-1260	302	15	lithography	lithography	NOUN
fuelectenerg-1260	302	16	methods	method	NOUN
fuelectenerg-1260	302	17	.	.	PUNCT
fuelectenerg-1260	303	1	this	this	PRON
fuelectenerg-1260	303	2	is	be	AUX
fuelectenerg-1260	303	3	mems	mem	NOUN
fuelectenerg-1260	303	4	design	design	NOUN
fuelectenerg-1260	303	5	simplification	simplification	NOUN
fuelectenerg-1260	303	6	with	with	ADP
fuelectenerg-1260	303	7	virtual	virtual	ADJ
fuelectenerg-1260	303	8	prototyping	prototype	VERB
fuelectenerg-1260	303	9	21	21	NUM
fuelectenerg-1260	303	10	because	because	SCONJ
fuelectenerg-1260	303	11	traditional	traditional	ADJ
fuelectenerg-1260	303	12	lithography	lithography	NOUN
fuelectenerg-1260	303	13	as	as	SCONJ
fuelectenerg-1260	303	14	used	use	VERB
fuelectenerg-1260	303	15	in	in	ADP
fuelectenerg-1260	303	16	semiconductor	semiconductor	NOUN
fuelectenerg-1260	303	17	manufacturing	manufacturing	NOUN
fuelectenerg-1260	303	18	requires	require	VERB
fuelectenerg-1260	303	19	expensive	expensive	ADJ
fuelectenerg-1260	303	20	equipment	equipment	NOUN
fuelectenerg-1260	303	21	and	and	CCONJ
fuelectenerg-1260	303	22	expensive	expensive	ADJ
fuelectenerg-1260	303	23	masks	mask	NOUN
fuelectenerg-1260	303	24	,	,	PUNCT
fuelectenerg-1260	303	25	which	which	PRON
fuelectenerg-1260	303	26	is	be	AUX
fuelectenerg-1260	303	27	justified	justify	VERB
fuelectenerg-1260	303	28	for	for	ADP
fuelectenerg-1260	303	29	mass	mass	NOUN
fuelectenerg-1260	303	30	production	production	NOUN
fuelectenerg-1260	303	31	,	,	PUNCT
fuelectenerg-1260	303	32	but	but	CCONJ
fuelectenerg-1260	303	33	not	not	PART
fuelectenerg-1260	303	34	for	for	ADP
fuelectenerg-1260	303	35	smaller	small	ADJ
fuelectenerg-1260	303	36	productions	production	NOUN
fuelectenerg-1260	303	37	of	of	ADP
fuelectenerg-1260	303	38	some	some	DET
fuelectenerg-1260	303	39	mems	mem	NOUN
fuelectenerg-1260	303	40	.	.	PUNCT
fuelectenerg-1260	304	1	the	the	DET
fuelectenerg-1260	304	2	cheaper	cheap	ADJ
fuelectenerg-1260	304	3	laser	laser	NOUN
fuelectenerg-1260	304	4	ablation	ablation	NOUN
fuelectenerg-1260	304	5	made	make	VERB
fuelectenerg-1260	304	6	it	it	PRON
fuelectenerg-1260	304	7	ideal	ideal	ADJ
fuelectenerg-1260	304	8	for	for	ADP
fuelectenerg-1260	304	9	nonmass	nonmass	NOUN
fuelectenerg-1260	304	10	produced	produce	VERB
fuelectenerg-1260	304	11	mems	mem	NOUN
fuelectenerg-1260	304	12	and	and	CCONJ
fuelectenerg-1260	304	13	it	it	PRON
fuelectenerg-1260	304	14	is	be	AUX
fuelectenerg-1260	304	15	also	also	ADV
fuelectenerg-1260	304	16	much	much	ADV
fuelectenerg-1260	304	17	simpler	simple	ADJ
fuelectenerg-1260	304	18	by	by	ADP
fuelectenerg-1260	304	19	allowing	allow	VERB
fuelectenerg-1260	304	20	other	other	ADJ
fuelectenerg-1260	304	21	materials	material	NOUN
fuelectenerg-1260	304	22	.	.	PUNCT
fuelectenerg-1260	305	1	abdelgawad	abdelgawad	NOUN
fuelectenerg-1260	305	2	et	et	PROPN
fuelectenerg-1260	305	3	al	al	PROPN
fuelectenerg-1260	305	4	.	.	PUNCT
fuelectenerg-1260	306	1	[	[	X
fuelectenerg-1260	306	2	62	62	NUM
fuelectenerg-1260	306	3	]	]	PUNCT
fuelectenerg-1260	306	4	have	have	AUX
fuelectenerg-1260	306	5	developed	develop	VERB
fuelectenerg-1260	306	6	a	a	DET
fuelectenerg-1260	306	7	cheap	cheap	ADJ
fuelectenerg-1260	306	8	technology	technology	NOUN
fuelectenerg-1260	306	9	to	to	PART
fuelectenerg-1260	306	10	produce	produce	VERB
fuelectenerg-1260	306	11	actuators	actuator	NOUN
fuelectenerg-1260	306	12	with	with	ADP
fuelectenerg-1260	306	13	5060m	5060m	NUM
fuelectenerg-1260	306	14	electrode	electrode	NOUN
fuelectenerg-1260	306	15	separation	separation	NOUN
fuelectenerg-1260	306	16	that	that	PRON
fuelectenerg-1260	306	17	allow	allow	VERB
fuelectenerg-1260	306	18	droplets	droplet	NOUN
fuelectenerg-1260	306	19	of	of	ADP
fuelectenerg-1260	306	20	1	1	NUM
fuelectenerg-1260	306	21	-	-	SYM
fuelectenerg-1260	306	22	12	12	NUM
fuelectenerg-1260	306	23	l	l	PROPN
fuelectenerg-1260	306	24	microfluid	microfluid	NOUN
fuelectenerg-1260	306	25	to	to	PART
fuelectenerg-1260	306	26	move	move	VERB
fuelectenerg-1260	306	27	,	,	PUNCT
fuelectenerg-1260	306	28	merge	merge	VERB
fuelectenerg-1260	306	29	or	or	CCONJ
fuelectenerg-1260	306	30	split	split	NOUN
fuelectenerg-1260	306	31	.	.	PUNCT
fuelectenerg-1260	307	1	they	they	PRON
fuelectenerg-1260	307	2	use	use	VERB
fuelectenerg-1260	307	3	digital	digital	ADJ
fuelectenerg-1260	307	4	microfluidics	microfluidic	NOUN
fuelectenerg-1260	307	5	and	and	CCONJ
fuelectenerg-1260	307	6	electrowetting	electrowetting	NOUN
fuelectenerg-1260	307	7	and	and	CCONJ
fuelectenerg-1260	307	8	electrophoresis	electrophoresis	NOUN
fuelectenerg-1260	307	9	to	to	PART
fuelectenerg-1260	307	10	measure	measure	VERB
fuelectenerg-1260	307	11	enzymatic	enzymatic	ADJ
fuelectenerg-1260	307	12	activity	activity	NOUN
fuelectenerg-1260	307	13	(	(	PUNCT
fuelectenerg-1260	307	14	enzymatic	enzymatic	ADJ
fuelectenerg-1260	307	15	assays	assay	NOUN
fuelectenerg-1260	307	16	)	)	PUNCT
fuelectenerg-1260	307	17	.	.	PUNCT
fuelectenerg-1260	308	1	what	what	PRON
fuelectenerg-1260	308	2	makes	make	VERB
fuelectenerg-1260	308	3	their	their	PRON
fuelectenerg-1260	308	4	work	work	NOUN
fuelectenerg-1260	308	5	so	so	ADV
fuelectenerg-1260	308	6	different	different	ADJ
fuelectenerg-1260	308	7	is	be	AUX
fuelectenerg-1260	308	8	that	that	SCONJ
fuelectenerg-1260	308	9	they	they	PRON
fuelectenerg-1260	308	10	did	do	VERB
fuelectenerg-1260	308	11	most	most	ADJ
fuelectenerg-1260	308	12	of	of	ADP
fuelectenerg-1260	308	13	this	this	PRON
fuelectenerg-1260	308	14	with	with	ADP
fuelectenerg-1260	308	15	very	very	ADV
fuelectenerg-1260	308	16	cheap	cheap	ADJ
fuelectenerg-1260	308	17	resources	resource	NOUN
fuelectenerg-1260	308	18	,	,	PUNCT
fuelectenerg-1260	308	19	i.e.	i.e.	X
fuelectenerg-1260	308	20	recycled	recycled	ADJ
fuelectenerg-1260	308	21	circuit	circuit	NOUN
fuelectenerg-1260	308	22	boards	board	NOUN
fuelectenerg-1260	308	23	and	and	CCONJ
fuelectenerg-1260	308	24	compact	compact	ADJ
fuelectenerg-1260	308	25	disks	disk	NOUN
fuelectenerg-1260	308	26	(	(	PUNCT
fuelectenerg-1260	308	27	cds	cd	NOUN
fuelectenerg-1260	308	28	)	)	PUNCT
fuelectenerg-1260	308	29	for	for	ADP
fuelectenerg-1260	308	30	gold	gold	NOUN
fuelectenerg-1260	308	31	and	and	CCONJ
fuelectenerg-1260	308	32	metals	metal	NOUN
fuelectenerg-1260	308	33	.	.	PUNCT
fuelectenerg-1260	309	1	for	for	ADP
fuelectenerg-1260	309	2	electrode	electrode	NOUN
fuelectenerg-1260	309	3	patterning	patterning	NOUN
fuelectenerg-1260	309	4	they	they	PRON
fuelectenerg-1260	309	5	used	use	VERB
fuelectenerg-1260	309	6	an	an	DET
fuelectenerg-1260	309	7	ink	ink	NOUN
fuelectenerg-1260	309	8	pen	pen	NOUN
fuelectenerg-1260	309	9	and	and	CCONJ
fuelectenerg-1260	309	10	ink	ink	NOUN
fuelectenerg-1260	309	11	masking	masking	NOUN
fuelectenerg-1260	309	12	made	make	VERB
fuelectenerg-1260	309	13	with	with	ADP
fuelectenerg-1260	309	14	a	a	DET
fuelectenerg-1260	309	15	razor	razor	NOUN
fuelectenerg-1260	309	16	blade	blade	NOUN
fuelectenerg-1260	309	17	instead	instead	ADV
fuelectenerg-1260	309	18	of	of	ADP
fuelectenerg-1260	309	19	expensive	expensive	ADJ
fuelectenerg-1260	309	20	photolithography	photolithography	NOUN
fuelectenerg-1260	309	21	with	with	ADP
fuelectenerg-1260	309	22	uv	uv	NOUN
fuelectenerg-1260	309	23	exposure	exposure	NOUN
fuelectenerg-1260	309	24	.	.	PUNCT
fuelectenerg-1260	310	1	for	for	ADP
fuelectenerg-1260	310	2	dielectric	dielectric	ADJ
fuelectenerg-1260	310	3	coating	coating	NOUN
fuelectenerg-1260	310	4	,	,	PUNCT
fuelectenerg-1260	310	5	they	they	PRON
fuelectenerg-1260	310	6	used	use	VERB
fuelectenerg-1260	310	7	cling	cle	VERB
fuelectenerg-1260	310	8	wrap	wrap	NOUN
fuelectenerg-1260	310	9	(	(	PUNCT
fuelectenerg-1260	310	10	plastic	plastic	NOUN
fuelectenerg-1260	310	11	film	film	NOUN
fuelectenerg-1260	310	12	used	use	VERB
fuelectenerg-1260	310	13	to	to	PART
fuelectenerg-1260	310	14	cover	cover	VERB
fuelectenerg-1260	310	15	food	food	NOUN
fuelectenerg-1260	310	16	)	)	PUNCT
fuelectenerg-1260	310	17	.	.	PUNCT
fuelectenerg-1260	311	1	for	for	ADP
fuelectenerg-1260	311	2	protective	protective	ADJ
fuelectenerg-1260	311	3	hydrophobic	hydrophobic	NOUN
fuelectenerg-1260	311	4	treatment	treatment	NOUN
fuelectenerg-1260	311	5	,	,	PUNCT
fuelectenerg-1260	311	6	they	they	PRON
fuelectenerg-1260	311	7	used	use	VERB
fuelectenerg-1260	311	8	cheap	cheap	ADJ
fuelectenerg-1260	311	9	car	car	NOUN
fuelectenerg-1260	311	10	windshield	windshield	NOUN
fuelectenerg-1260	311	11	protector	protector	NOUN
fuelectenerg-1260	311	12	instead	instead	ADV
fuelectenerg-1260	311	13	of	of	ADP
fuelectenerg-1260	311	14	expensive	expensive	ADJ
fuelectenerg-1260	311	15	and	and	CCONJ
fuelectenerg-1260	311	16	licensed	licensed	ADJ
fuelectenerg-1260	311	17	use	use	NOUN
fuelectenerg-1260	311	18	of	of	ADP
fuelectenerg-1260	311	19	teflon	teflon	NOUN
fuelectenerg-1260	311	20	.	.	PUNCT
fuelectenerg-1260	312	1	they	they	PRON
fuelectenerg-1260	312	2	have	have	AUX
fuelectenerg-1260	312	3	successfully	successfully	ADV
fuelectenerg-1260	312	4	realized	realize	VERB
fuelectenerg-1260	312	5	their	their	PRON
fuelectenerg-1260	312	6	experimental	experimental	ADJ
fuelectenerg-1260	312	7	work	work	NOUN
fuelectenerg-1260	312	8	for	for	ADP
fuelectenerg-1260	312	9	prototyping	prototype	VERB
fuelectenerg-1260	312	10	.	.	PUNCT
fuelectenerg-1260	313	1	to	to	PART
fuelectenerg-1260	313	2	read	read	VERB
fuelectenerg-1260	313	3	about	about	ADP
fuelectenerg-1260	313	4	this	this	DET
fuelectenerg-1260	313	5	work	work	NOUN
fuelectenerg-1260	313	6	is	be	AUX
fuelectenerg-1260	313	7	not	not	PART
fuelectenerg-1260	313	8	just	just	ADV
fuelectenerg-1260	313	9	inspiring	inspiring	ADJ
fuelectenerg-1260	313	10	,	,	PUNCT
fuelectenerg-1260	313	11	it	it	PRON
fuelectenerg-1260	313	12	is	be	AUX
fuelectenerg-1260	313	13	also	also	ADV
fuelectenerg-1260	313	14	highly	highly	ADV
fuelectenerg-1260	313	15	commendable	commendable	ADJ
fuelectenerg-1260	313	16	for	for	ADP
fuelectenerg-1260	313	17	education	education	NOUN
fuelectenerg-1260	313	18	.	.	PUNCT
fuelectenerg-1260	314	1	in	in	ADP
fuelectenerg-1260	314	2	the	the	DET
fuelectenerg-1260	314	3	strive	strive	NOUN
fuelectenerg-1260	314	4	for	for	ADP
fuelectenerg-1260	314	5	rapid	rapid	ADJ
fuelectenerg-1260	314	6	prototyping	prototyping	NOUN
fuelectenerg-1260	314	7	of	of	ADP
fuelectenerg-1260	314	8	precise	precise	ADJ
fuelectenerg-1260	314	9	submicron	submicron	NOUN
fuelectenerg-1260	314	10	and	and	CCONJ
fuelectenerg-1260	314	11	nanogaps	nanogap	NOUN
fuelectenerg-1260	314	12	,	,	PUNCT
fuelectenerg-1260	314	13	villarroya	villarroya	PROPN
fuelectenerg-1260	314	14	et	et	PROPN
fuelectenerg-1260	314	15	al	al	PROPN
fuelectenerg-1260	314	16	.	.	PROPN
fuelectenerg-1260	314	17	have	have	AUX
fuelectenerg-1260	314	18	experimented	experiment	VERB
fuelectenerg-1260	314	19	combining	combine	VERB
fuelectenerg-1260	314	20	a	a	DET
fuelectenerg-1260	314	21	focused	focus	VERB
fuelectenerg-1260	314	22	ion	ion	NOUN
fuelectenerg-1260	314	23	beam	beam	NOUN
fuelectenerg-1260	314	24	(	(	PUNCT
fuelectenerg-1260	314	25	fib	fib	NOUN
fuelectenerg-1260	314	26	)	)	PUNCT
fuelectenerg-1260	314	27	followed	follow	VERB
fuelectenerg-1260	314	28	by	by	ADP
fuelectenerg-1260	314	29	reactive	reactive	ADJ
fuelectenerg-1260	314	30	ion	ion	NOUN
fuelectenerg-1260	314	31	etching	etch	VERB
fuelectenerg-1260	314	32	using	use	VERB
fuelectenerg-1260	314	33	aluminium	aluminium	NOUN
fuelectenerg-1260	314	34	masking	masking	NOUN
fuelectenerg-1260	314	35	.	.	PUNCT
fuelectenerg-1260	315	1	their	their	PRON
fuelectenerg-1260	315	2	process	process	NOUN
fuelectenerg-1260	315	3	achieved	achieve	VERB
fuelectenerg-1260	315	4	trenches	trench	NOUN
fuelectenerg-1260	315	5	of	of	ADP
fuelectenerg-1260	315	6	80	80	NUM
fuelectenerg-1260	315	7	nm	nm	ADV
fuelectenerg-1260	315	8	wide	wide	ADJ
fuelectenerg-1260	315	9	and	and	CCONJ
fuelectenerg-1260	315	10	11	11	NUM
fuelectenerg-1260	315	11	nm	nm	ADV
fuelectenerg-1260	315	12	deep	deep	ADJ
fuelectenerg-1260	315	13	.	.	PUNCT
fuelectenerg-1260	316	1	the	the	DET
fuelectenerg-1260	316	2	goal	goal	NOUN
fuelectenerg-1260	316	3	was	be	AUX
fuelectenerg-1260	316	4	to	to	PART
fuelectenerg-1260	316	5	produce	produce	VERB
fuelectenerg-1260	316	6	nanodots	nanodot	NOUN
fuelectenerg-1260	316	7	[	[	X
fuelectenerg-1260	316	8	63	63	NUM
fuelectenerg-1260	316	9	]	]	PUNCT
fuelectenerg-1260	316	10	.	.	PUNCT
fuelectenerg-1260	317	1	microfluidics	microfluidic	NOUN
fuelectenerg-1260	317	2	present	present	VERB
fuelectenerg-1260	317	3	another	another	DET
fuelectenerg-1260	317	4	challenge	challenge	NOUN
fuelectenerg-1260	317	5	to	to	ADP
fuelectenerg-1260	317	6	rapid	rapid	ADJ
fuelectenerg-1260	317	7	prototyping	prototyping	NOUN
fuelectenerg-1260	317	8	.	.	PUNCT
fuelectenerg-1260	318	1	the	the	DET
fuelectenerg-1260	318	2	quantities	quantity	NOUN
fuelectenerg-1260	318	3	of	of	ADP
fuelectenerg-1260	318	4	fluid	fluid	NOUN
fuelectenerg-1260	318	5	used	use	VERB
fuelectenerg-1260	318	6	in	in	ADP
fuelectenerg-1260	318	7	the	the	DET
fuelectenerg-1260	318	8	end	end	NOUN
fuelectenerg-1260	318	9	product	product	NOUN
fuelectenerg-1260	318	10	are	be	AUX
fuelectenerg-1260	318	11	minuscule	minuscule	ADJ
fuelectenerg-1260	318	12	and	and	CCONJ
fuelectenerg-1260	318	13	in	in	ADP
fuelectenerg-1260	318	14	biomedical	biomedical	ADJ
fuelectenerg-1260	318	15	application	application	NOUN
fuelectenerg-1260	318	16	they	they	PRON
fuelectenerg-1260	318	17	are	be	AUX
fuelectenerg-1260	318	18	used	use	VERB
fuelectenerg-1260	318	19	briefly	briefly	ADV
fuelectenerg-1260	318	20	and	and	CCONJ
fuelectenerg-1260	318	21	discarded	discard	VERB
fuelectenerg-1260	318	22	.	.	PUNCT
fuelectenerg-1260	319	1	this	this	PRON
fuelectenerg-1260	319	2	requires	require	VERB
fuelectenerg-1260	319	3	large	large	ADJ
fuelectenerg-1260	319	4	quantities	quantity	NOUN
fuelectenerg-1260	319	5	of	of	ADP
fuelectenerg-1260	319	6	mems	mem	NOUN
fuelectenerg-1260	319	7	or	or	CCONJ
fuelectenerg-1260	319	8	nems	nem	NOUN
fuelectenerg-1260	319	9	to	to	PART
fuelectenerg-1260	319	10	be	be	AUX
fuelectenerg-1260	319	11	produced	produce	VERB
fuelectenerg-1260	319	12	.	.	PUNCT
fuelectenerg-1260	320	1	this	this	PRON
fuelectenerg-1260	320	2	makes	make	VERB
fuelectenerg-1260	320	3	conventional	conventional	ADJ
fuelectenerg-1260	320	4	manufacturing	manufacturing	NOUN
fuelectenerg-1260	320	5	in	in	ADP
fuelectenerg-1260	320	6	silicon	silicon	NOUN
fuelectenerg-1260	320	7	unattractive	unattractive	ADJ
fuelectenerg-1260	320	8	due	due	ADP
fuelectenerg-1260	320	9	to	to	ADP
fuelectenerg-1260	320	10	their	their	PRON
fuelectenerg-1260	320	11	complicated	complicated	ADJ
fuelectenerg-1260	320	12	and	and	CCONJ
fuelectenerg-1260	320	13	slow	slow	ADJ
fuelectenerg-1260	320	14	production	production	NOUN
fuelectenerg-1260	320	15	and	and	CCONJ
fuelectenerg-1260	320	16	expensive	expensive	ADJ
fuelectenerg-1260	320	17	equipment	equipment	NOUN
fuelectenerg-1260	320	18	in	in	ADP
fuelectenerg-1260	320	19	a	a	DET
fuelectenerg-1260	320	20	foundry	foundry	NOUN
fuelectenerg-1260	320	21	with	with	ADP
fuelectenerg-1260	320	22	cleanroom	cleanroom	NOUN
fuelectenerg-1260	320	23	.	.	PUNCT
fuelectenerg-1260	321	1	do	do	AUX
fuelectenerg-1260	321	2	et	et	PROPN
fuelectenerg-1260	321	3	al	al	PROPN
fuelectenerg-1260	321	4	.	.	PROPN
fuelectenerg-1260	321	5	have	have	AUX
fuelectenerg-1260	321	6	developed	develop	VERB
fuelectenerg-1260	321	7	a	a	DET
fuelectenerg-1260	321	8	process	process	NOUN
fuelectenerg-1260	321	9	using	use	VERB
fuelectenerg-1260	321	10	a	a	DET
fuelectenerg-1260	321	11	cutter	cutter	NOUN
fuelectenerg-1260	321	12	plotter	plotter	NOUN
fuelectenerg-1260	321	13	(	(	PUNCT
fuelectenerg-1260	321	14	a	a	DET
fuelectenerg-1260	321	15	“	"	PUNCT
fuelectenerg-1260	321	16	printer	printer	NOUN
fuelectenerg-1260	321	17	”	"	PUNCT
fuelectenerg-1260	321	18	that	that	PRON
fuelectenerg-1260	321	19	removes	remove	VERB
fuelectenerg-1260	321	20	material	material	NOUN
fuelectenerg-1260	321	21	)	)	PUNCT
fuelectenerg-1260	321	22	to	to	PART
fuelectenerg-1260	321	23	scratch	scratch	VERB
fuelectenerg-1260	321	24	or	or	CCONJ
fuelectenerg-1260	321	25	cut	cut	VERB
fuelectenerg-1260	321	26	through	through	ADP
fuelectenerg-1260	321	27	a	a	DET
fuelectenerg-1260	321	28	polymer	polymer	NOUN
fuelectenerg-1260	321	29	substrate	substrate	NOUN
fuelectenerg-1260	321	30	,	,	PUNCT
fuelectenerg-1260	321	31	patterning	pattern	VERB
fuelectenerg-1260	321	32	the	the	DET
fuelectenerg-1260	321	33	structures	structure	NOUN
fuelectenerg-1260	321	34	layer	layer	NOUN
fuelectenerg-1260	321	35	by	by	ADP
fuelectenerg-1260	321	36	layer	layer	NOUN
fuelectenerg-1260	321	37	with	with	ADP
fuelectenerg-1260	321	38	holes	hole	NOUN
fuelectenerg-1260	321	39	and	and	CCONJ
fuelectenerg-1260	321	40	trenches	trench	NOUN
fuelectenerg-1260	321	41	.	.	PUNCT
fuelectenerg-1260	322	1	the	the	DET
fuelectenerg-1260	322	2	polymer	polymer	NOUN
fuelectenerg-1260	322	3	sheets	sheet	NOUN
fuelectenerg-1260	322	4	are	be	AUX
fuelectenerg-1260	322	5	then	then	ADV
fuelectenerg-1260	322	6	assembled	assemble	VERB
fuelectenerg-1260	322	7	one	one	NUM
fuelectenerg-1260	322	8	upon	upon	SCONJ
fuelectenerg-1260	322	9	the	the	DET
fuelectenerg-1260	322	10	other	other	ADJ
fuelectenerg-1260	322	11	(	(	PUNCT
fuelectenerg-1260	322	12	like	like	ADJ
fuelectenerg-1260	322	13	pancakes	pancake	NOUN
fuelectenerg-1260	322	14	)	)	PUNCT
fuelectenerg-1260	322	15	and	and	CCONJ
fuelectenerg-1260	322	16	bonded	bond	VERB
fuelectenerg-1260	322	17	.	.	PUNCT
fuelectenerg-1260	323	1	the	the	DET
fuelectenerg-1260	323	2	arrays	array	NOUN
fuelectenerg-1260	323	3	of	of	ADP
fuelectenerg-1260	323	4	overlapping	overlap	VERB
fuelectenerg-1260	323	5	holes	hole	NOUN
fuelectenerg-1260	323	6	make	make	VERB
fuelectenerg-1260	323	7	the	the	DET
fuelectenerg-1260	323	8	containers	container	NOUN
fuelectenerg-1260	323	9	for	for	ADP
fuelectenerg-1260	323	10	the	the	DET
fuelectenerg-1260	323	11	fluids	fluid	NOUN
fuelectenerg-1260	323	12	.	.	PUNCT
fuelectenerg-1260	324	1	this	this	DET
fuelectenerg-1260	324	2	process	process	NOUN
fuelectenerg-1260	324	3	achieved	achieve	VERB
fuelectenerg-1260	324	4	20m	20m	NUM
fuelectenerg-1260	324	5	wide	wide	ADJ
fuelectenerg-1260	324	6	and	and	CCONJ
fuelectenerg-1260	324	7	30m	30m	NUM
fuelectenerg-1260	324	8	deep	deep	ADJ
fuelectenerg-1260	324	9	channels	channel	NOUN
fuelectenerg-1260	324	10	in	in	ADP
fuelectenerg-1260	324	11	less	less	ADJ
fuelectenerg-1260	324	12	than	than	ADP
fuelectenerg-1260	324	13	30	30	NUM
fuelectenerg-1260	324	14	minutes	minute	NOUN
fuelectenerg-1260	324	15	.	.	PUNCT
fuelectenerg-1260	325	1	this	this	DET
fuelectenerg-1260	325	2	process	process	NOUN
fuelectenerg-1260	325	3	is	be	AUX
fuelectenerg-1260	325	4	fast	fast	ADJ
fuelectenerg-1260	325	5	and	and	CCONJ
fuelectenerg-1260	325	6	does	do	AUX
fuelectenerg-1260	325	7	not	not	PART
fuelectenerg-1260	325	8	need	need	VERB
fuelectenerg-1260	325	9	cleanroom	cleanroom	NOUN
fuelectenerg-1260	325	10	conditions	condition	NOUN
fuelectenerg-1260	325	11	[	[	X
fuelectenerg-1260	325	12	64	64	NUM
fuelectenerg-1260	325	13	]	]	PUNCT
fuelectenerg-1260	325	14	.	.	PUNCT
fuelectenerg-1260	326	1	another	another	DET
fuelectenerg-1260	326	2	interesting	interesting	ADJ
fuelectenerg-1260	326	3	case	case	NOUN
fuelectenerg-1260	326	4	is	be	AUX
fuelectenerg-1260	326	5	printing	print	VERB
fuelectenerg-1260	326	6	mems	mem	NOUN
fuelectenerg-1260	326	7	onto	onto	ADP
fuelectenerg-1260	326	8	paper	paper	NOUN
fuelectenerg-1260	326	9	.	.	PUNCT
fuelectenerg-1260	327	1	in	in	ADP
fuelectenerg-1260	327	2	a	a	DET
fuelectenerg-1260	327	3	feasibility	feasibility	NOUN
fuelectenerg-1260	327	4	study	study	NOUN
fuelectenerg-1260	327	5	,	,	PUNCT
fuelectenerg-1260	327	6	meiss	meiss	VERB
fuelectenerg-1260	327	7	et	et	PROPN
fuelectenerg-1260	327	8	al	al	PROPN
fuelectenerg-1260	327	9	.	.	PROPN
fuelectenerg-1260	327	10	have	have	AUX
fuelectenerg-1260	327	11	developed	develop	VERB
fuelectenerg-1260	327	12	a	a	DET
fuelectenerg-1260	327	13	method	method	NOUN
fuelectenerg-1260	327	14	and	and	CCONJ
fuelectenerg-1260	327	15	special	special	ADJ
fuelectenerg-1260	327	16	ink	ink	NOUN
fuelectenerg-1260	327	17	to	to	PART
fuelectenerg-1260	327	18	print	print	VERB
fuelectenerg-1260	327	19	resistive	resistive	ADJ
fuelectenerg-1260	327	20	sensors	sensor	NOUN
fuelectenerg-1260	327	21	onto	onto	ADP
fuelectenerg-1260	327	22	paper	paper	NOUN
fuelectenerg-1260	327	23	substrates	substrate	NOUN
fuelectenerg-1260	327	24	using	use	VERB
fuelectenerg-1260	327	25	inkjet	inkjet	NOUN
fuelectenerg-1260	327	26	equipment	equipment	NOUN
fuelectenerg-1260	327	27	.	.	PUNCT
fuelectenerg-1260	328	1	the	the	DET
fuelectenerg-1260	328	2	technique	technique	NOUN
fuelectenerg-1260	328	3	can	can	AUX
fuelectenerg-1260	328	4	be	be	AUX
fuelectenerg-1260	328	5	used	use	VERB
fuelectenerg-1260	328	6	in	in	ADP
fuelectenerg-1260	328	7	iterative	iterative	NOUN
fuelectenerg-1260	328	8	development	development	NOUN
fuelectenerg-1260	328	9	and	and	CCONJ
fuelectenerg-1260	328	10	complex	complex	ADJ
fuelectenerg-1260	328	11	model	model	NOUN
fuelectenerg-1260	328	12	design	design	NOUN
fuelectenerg-1260	328	13	of	of	ADP
fuelectenerg-1260	328	14	sensors	sensor	NOUN
fuelectenerg-1260	328	15	for	for	ADP
fuelectenerg-1260	328	16	low	low	ADJ
fuelectenerg-1260	328	17	cost	cost	NOUN
fuelectenerg-1260	328	18	applications	application	NOUN
fuelectenerg-1260	328	19	,	,	PUNCT
fuelectenerg-1260	328	20	such	such	ADJ
fuelectenerg-1260	328	21	as	as	ADP
fuelectenerg-1260	328	22	medical	medical	ADJ
fuelectenerg-1260	328	23	disposal	disposal	NOUN
fuelectenerg-1260	328	24	or	or	CCONJ
fuelectenerg-1260	328	25	consumer	consumer	NOUN
fuelectenerg-1260	328	26	goods	good	NOUN
fuelectenerg-1260	328	27	packaging	packaging	NOUN
fuelectenerg-1260	329	1	[	[	X
fuelectenerg-1260	329	2	65	65	NUM
fuelectenerg-1260	329	3	]	]	PUNCT
fuelectenerg-1260	329	4	.	.	PUNCT
fuelectenerg-1260	330	1	speed	speed	NOUN
fuelectenerg-1260	330	2	is	be	AUX
fuelectenerg-1260	330	3	paramount	paramount	ADJ
fuelectenerg-1260	330	4	in	in	ADP
fuelectenerg-1260	330	5	prototyping	prototyping	NOUN
fuelectenerg-1260	330	6	.	.	PUNCT
fuelectenerg-1260	331	1	3d	3d	NUM
fuelectenerg-1260	331	2	printing	printing	NOUN
fuelectenerg-1260	331	3	had	have	VERB
fuelectenerg-1260	331	4	a	a	DET
fuelectenerg-1260	331	5	substantial	substantial	ADJ
fuelectenerg-1260	331	6	impact	impact	NOUN
fuelectenerg-1260	331	7	in	in	ADP
fuelectenerg-1260	331	8	rapid	rapid	ADJ
fuelectenerg-1260	331	9	prototyping	prototyping	NOUN
fuelectenerg-1260	331	10	because	because	SCONJ
fuelectenerg-1260	331	11	it	it	PRON
fuelectenerg-1260	331	12	is	be	AUX
fuelectenerg-1260	331	13	a	a	DET
fuelectenerg-1260	331	14	fast	fast	ADJ
fuelectenerg-1260	331	15	way	way	NOUN
fuelectenerg-1260	331	16	of	of	ADP
fuelectenerg-1260	331	17	building	build	VERB
fuelectenerg-1260	331	18	up	up	ADP
fuelectenerg-1260	331	19	structures	structure	NOUN
fuelectenerg-1260	331	20	.	.	PUNCT
fuelectenerg-1260	332	1	by	by	ADP
fuelectenerg-1260	332	2	adding	add	VERB
fuelectenerg-1260	332	3	layer	layer	NOUN
fuelectenerg-1260	332	4	after	after	ADP
fuelectenerg-1260	332	5	layer	layer	NOUN
fuelectenerg-1260	332	6	,	,	PUNCT
fuelectenerg-1260	332	7	fine	fine	ADJ
fuelectenerg-1260	332	8	structures	structure	NOUN
fuelectenerg-1260	332	9	can	can	AUX
fuelectenerg-1260	332	10	be	be	AUX
fuelectenerg-1260	332	11	produced	produce	VERB
fuelectenerg-1260	332	12	using	use	VERB
fuelectenerg-1260	332	13	materials	material	NOUN
fuelectenerg-1260	332	14	like	like	ADP
fuelectenerg-1260	332	15	plastic	plastic	NOUN
fuelectenerg-1260	332	16	and	and	CCONJ
fuelectenerg-1260	332	17	metal	metal	NOUN
fuelectenerg-1260	332	18	.	.	PUNCT
fuelectenerg-1260	333	1	lifton	lifton	PROPN
fuelectenerg-1260	333	2	et	et	PROPN
fuelectenerg-1260	333	3	al	al	PROPN
fuelectenerg-1260	333	4	.	.	PROPN
fuelectenerg-1260	333	5	have	have	AUX
fuelectenerg-1260	333	6	researched	research	VERB
fuelectenerg-1260	333	7	and	and	CCONJ
fuelectenerg-1260	333	8	compared	compare	VERB
fuelectenerg-1260	333	9	3d	3d	NUM
fuelectenerg-1260	333	10	printing	print	VERB
fuelectenerg-1260	333	11	with	with	ADP
fuelectenerg-1260	333	12	other	other	ADJ
fuelectenerg-1260	333	13	technologies	technology	NOUN
fuelectenerg-1260	333	14	.	.	PUNCT
fuelectenerg-1260	334	1	they	they	PRON
fuelectenerg-1260	334	2	found	find	VERB
fuelectenerg-1260	334	3	that	that	SCONJ
fuelectenerg-1260	334	4	for	for	ADP
fuelectenerg-1260	334	5	some	some	DET
fuelectenerg-1260	334	6	currently	currently	ADV
fuelectenerg-1260	334	7	silicon	silicon	NOUN
fuelectenerg-1260	334	8	-	-	PUNCT
fuelectenerg-1260	334	9	based	base	VERB
fuelectenerg-1260	334	10	mems	mem	NOUN
fuelectenerg-1260	334	11	,	,	PUNCT
fuelectenerg-1260	334	12	the	the	DET
fuelectenerg-1260	334	13	production	production	NOUN
fuelectenerg-1260	334	14	time	time	NOUN
fuelectenerg-1260	334	15	can	can	AUX
fuelectenerg-1260	334	16	be	be	AUX
fuelectenerg-1260	334	17	drastically	drastically	ADV
fuelectenerg-1260	334	18	reduced	reduce	VERB
fuelectenerg-1260	334	19	by	by	ADP
fuelectenerg-1260	334	20	replacing	replace	VERB
fuelectenerg-1260	334	21	long	long	ADJ
fuelectenerg-1260	334	22	-	-	PUNCT
fuelectenerg-1260	334	23	cycle	cycle	NOUN
fuelectenerg-1260	334	24	prototyping	prototyping	NOUN
fuelectenerg-1260	334	25	and	and	CCONJ
fuelectenerg-1260	334	26	packaging	packaging	NOUN
fuelectenerg-1260	334	27	loops	loop	NOUN
fuelectenerg-1260	334	28	with	with	ADP
fuelectenerg-1260	334	29	3d	3d	NUM
fuelectenerg-1260	334	30	printing	printing	NOUN
fuelectenerg-1260	334	31	.	.	PUNCT
fuelectenerg-1260	335	1	there	there	PRON
fuelectenerg-1260	335	2	is	be	VERB
fuelectenerg-1260	335	3	the	the	DET
fuelectenerg-1260	335	4	potential	potential	NOUN
fuelectenerg-1260	335	5	to	to	PART
fuelectenerg-1260	335	6	use	use	VERB
fuelectenerg-1260	335	7	3d	3d	NUM
fuelectenerg-1260	335	8	printing	printing	NOUN
fuelectenerg-1260	335	9	for	for	ADP
fuelectenerg-1260	335	10	electronic	electronic	ADJ
fuelectenerg-1260	335	11	packaging	packaging	NOUN
fuelectenerg-1260	335	12	of	of	ADP
fuelectenerg-1260	335	13	mems	mem	NOUN
fuelectenerg-1260	335	14	devices	device	NOUN
fuelectenerg-1260	335	15	at	at	ADP
fuelectenerg-1260	335	16	the	the	DET
fuelectenerg-1260	335	17	wafer	wafer	NOUN
fuelectenerg-1260	335	18	stage	stage	NOUN
fuelectenerg-1260	335	19	.	.	PUNCT
fuelectenerg-1260	336	1	3d	3d	NUM
fuelectenerg-1260	336	2	printing	printing	NOUN
fuelectenerg-1260	336	3	is	be	AUX
fuelectenerg-1260	336	4	suitable	suitable	ADJ
fuelectenerg-1260	336	5	for	for	ADP
fuelectenerg-1260	336	6	features	feature	NOUN
fuelectenerg-1260	336	7	larger	large	ADJ
fuelectenerg-1260	336	8	than	than	ADP
fuelectenerg-1260	336	9	1m	1m	PROPN
fuelectenerg-1260	336	10	,	,	PUNCT
fuelectenerg-1260	336	11	such	such	ADJ
fuelectenerg-1260	336	12	as	as	ADP
fuelectenerg-1260	336	13	lab	lab	NOUN
fuelectenerg-1260	336	14	on	on	ADP
fuelectenerg-1260	336	15	a	a	DET
fuelectenerg-1260	336	16	chip	chip	NOUN
fuelectenerg-1260	336	17	.	.	PUNCT
fuelectenerg-1260	337	1	however	however	ADV
fuelectenerg-1260	337	2	3d	3d	PROPN
fuelectenerg-1260	337	3	printing	printing	NOUN
fuelectenerg-1260	337	4	is	be	AUX
fuelectenerg-1260	337	5	not	not	PART
fuelectenerg-1260	337	6	suitable	suitable	ADJ
fuelectenerg-1260	337	7	for	for	ADP
fuelectenerg-1260	337	8	structural	structural	ADJ
fuelectenerg-1260	337	9	elements	element	NOUN
fuelectenerg-1260	337	10	such	such	ADJ
fuelectenerg-1260	337	11	as	as	ADP
fuelectenerg-1260	337	12	cantilevers	cantilever	NOUN
fuelectenerg-1260	337	13	and	and	CCONJ
fuelectenerg-1260	337	14	springs	spring	NOUN
fuelectenerg-1260	337	15	because	because	SCONJ
fuelectenerg-1260	337	16	the	the	DET
fuelectenerg-1260	337	17	polymers	polymer	NOUN
fuelectenerg-1260	337	18	used	use	VERB
fuelectenerg-1260	337	19	incompatible	incompatible	ADJ
fuelectenerg-1260	337	20	with	with	ADP
fuelectenerg-1260	337	21	their	their	PRON
fuelectenerg-1260	337	22	desired	desire	VERB
fuelectenerg-1260	337	23	functions	function	NOUN
fuelectenerg-1260	337	24	[	[	X
fuelectenerg-1260	337	25	66	66	NUM
fuelectenerg-1260	337	26	]	]	PUNCT
fuelectenerg-1260	337	27	.	.	PUNCT
fuelectenerg-1260	338	1	22	22	NUM
fuelectenerg-1260	338	2	r.	r.	PROPN
fuelectenerg-1260	338	3	sitte	sitte	PROPN
fuelectenerg-1260	338	4	5	5	NUM
fuelectenerg-1260	338	5	.	.	PUNCT
fuelectenerg-1260	338	6	virtual	virtual	ADJ
fuelectenerg-1260	338	7	reality	reality	NOUN
fuelectenerg-1260	338	8	prototyping	prototype	VERB
fuelectenerg-1260	338	9	virtual	virtual	ADJ
fuelectenerg-1260	338	10	prototyping	prototyping	NOUN
fuelectenerg-1260	338	11	has	have	AUX
fuelectenerg-1260	338	12	been	be	AUX
fuelectenerg-1260	338	13	around	around	ADV
fuelectenerg-1260	338	14	for	for	ADP
fuelectenerg-1260	338	15	over	over	ADP
fuelectenerg-1260	338	16	a	a	DET
fuelectenerg-1260	338	17	decade	decade	NOUN
fuelectenerg-1260	338	18	.	.	PUNCT
fuelectenerg-1260	339	1	it	it	PRON
fuelectenerg-1260	339	2	became	become	VERB
fuelectenerg-1260	339	3	possible	possible	ADJ
fuelectenerg-1260	339	4	with	with	ADP
fuelectenerg-1260	339	5	increased	increase	VERB
fuelectenerg-1260	339	6	computing	computing	NOUN
fuelectenerg-1260	339	7	power	power	NOUN
fuelectenerg-1260	339	8	and	and	CCONJ
fuelectenerg-1260	339	9	faster	fast	ADJ
fuelectenerg-1260	339	10	vr	vr	NOUN
fuelectenerg-1260	339	11	algorithms	algorithm	NOUN
fuelectenerg-1260	339	12	.	.	PUNCT
fuelectenerg-1260	340	1	its	its	PRON
fuelectenerg-1260	340	2	application	application	NOUN
fuelectenerg-1260	340	3	in	in	ADP
fuelectenerg-1260	340	4	mems	mem	NOUN
fuelectenerg-1260	340	5	is	be	AUX
fuelectenerg-1260	340	6	rather	rather	ADV
fuelectenerg-1260	340	7	limited	limited	ADJ
fuelectenerg-1260	340	8	,	,	PUNCT
fuelectenerg-1260	340	9	which	which	PRON
fuelectenerg-1260	340	10	is	be	AUX
fuelectenerg-1260	340	11	understandable	understandable	ADJ
fuelectenerg-1260	340	12	,	,	PUNCT
fuelectenerg-1260	340	13	given	give	VERB
fuelectenerg-1260	340	14	the	the	DET
fuelectenerg-1260	340	15	complexity	complexity	NOUN
fuelectenerg-1260	340	16	of	of	ADP
fuelectenerg-1260	340	17	manufacturing	manufacturing	NOUN
fuelectenerg-1260	340	18	.	.	PUNCT
fuelectenerg-1260	341	1	cecil	cecil	PROPN
fuelectenerg-1260	341	2	et	et	PROPN
fuelectenerg-1260	341	3	al	al	PROPN
fuelectenerg-1260	341	4	.	.	PROPN
fuelectenerg-1260	341	5	have	have	AUX
fuelectenerg-1260	341	6	presented	present	VERB
fuelectenerg-1260	341	7	a	a	DET
fuelectenerg-1260	341	8	comprehensive	comprehensive	ADJ
fuelectenerg-1260	341	9	research	research	NOUN
fuelectenerg-1260	341	10	in	in	ADP
fuelectenerg-1260	341	11	virtual	virtual	ADJ
fuelectenerg-1260	341	12	prototyping	prototyping	NOUN
fuelectenerg-1260	341	13	[	[	X
fuelectenerg-1260	341	14	67	67	NUM
fuelectenerg-1260	341	15	]	]	PUNCT
fuelectenerg-1260	341	16	.	.	PUNCT
fuelectenerg-1260	342	1	however	however	ADV
fuelectenerg-1260	342	2	their	their	PRON
fuelectenerg-1260	342	3	work	work	NOUN
fuelectenerg-1260	342	4	was	be	AUX
fuelectenerg-1260	342	5	aimed	aim	VERB
fuelectenerg-1260	342	6	at	at	ADP
fuelectenerg-1260	342	7	vp	vp	PROPN
fuelectenerg-1260	342	8	in	in	ADP
fuelectenerg-1260	342	9	general	general	ADJ
fuelectenerg-1260	342	10	,	,	PUNCT
fuelectenerg-1260	342	11	not	not	PART
fuelectenerg-1260	342	12	necessarily	necessarily	ADV
fuelectenerg-1260	342	13	mems	mem	NOUN
fuelectenerg-1260	342	14	,	,	PUNCT
fuelectenerg-1260	342	15	but	but	CCONJ
fuelectenerg-1260	342	16	the	the	DET
fuelectenerg-1260	342	17	explanations	explanation	NOUN
fuelectenerg-1260	342	18	are	be	AUX
fuelectenerg-1260	342	19	equally	equally	ADV
fuelectenerg-1260	342	20	important	important	ADJ
fuelectenerg-1260	342	21	for	for	ADP
fuelectenerg-1260	342	22	mems	mems	PROPN
fuelectenerg-1260	342	23	vp	vp	PROPN
fuelectenerg-1260	342	24	.	.	PUNCT
fuelectenerg-1260	343	1	jiang	jiang	PROPN
fuelectenerg-1260	343	2	et	et	PROPN
fuelectenerg-1260	343	3	al	al	PROPN
fuelectenerg-1260	343	4	.	.	PROPN
fuelectenerg-1260	343	5	have	have	AUX
fuelectenerg-1260	343	6	developed	develop	VERB
fuelectenerg-1260	343	7	a	a	DET
fuelectenerg-1260	343	8	proposal	proposal	NOUN
fuelectenerg-1260	343	9	for	for	ADP
fuelectenerg-1260	343	10	a	a	DET
fuelectenerg-1260	343	11	service	service	NOUN
fuelectenerg-1260	343	12	driven	drive	VERB
fuelectenerg-1260	343	13	mems	mem	NOUN
fuelectenerg-1260	343	14	cad	cad	PROPN
fuelectenerg-1260	343	15	design	design	NOUN
fuelectenerg-1260	343	16	tool	tool	NOUN
fuelectenerg-1260	343	17	.	.	PUNCT
fuelectenerg-1260	344	1	contrary	contrary	ADJ
fuelectenerg-1260	344	2	to	to	ADP
fuelectenerg-1260	344	3	traditional	traditional	ADJ
fuelectenerg-1260	344	4	bottom	bottom	NOUN
fuelectenerg-1260	344	5	up	up	ADP
fuelectenerg-1260	344	6	approaches	approach	NOUN
fuelectenerg-1260	344	7	,	,	PUNCT
fuelectenerg-1260	344	8	the	the	DET
fuelectenerg-1260	344	9	authors	author	NOUN
fuelectenerg-1260	344	10	argue	argue	VERB
fuelectenerg-1260	344	11	for	for	ADP
fuelectenerg-1260	344	12	a	a	DET
fuelectenerg-1260	344	13	top	top	ADJ
fuelectenerg-1260	344	14	down	down	ADP
fuelectenerg-1260	344	15	approach	approach	NOUN
fuelectenerg-1260	344	16	.	.	PUNCT
fuelectenerg-1260	345	1	this	this	DET
fuelectenerg-1260	345	2	project	project	NOUN
fuelectenerg-1260	345	3	was	be	AUX
fuelectenerg-1260	345	4	aimed	aim	VERB
fuelectenerg-1260	345	5	at	at	ADP
fuelectenerg-1260	345	6	designers	designer	NOUN
fuelectenerg-1260	345	7	with	with	ADP
fuelectenerg-1260	345	8	little	little	ADJ
fuelectenerg-1260	345	9	knowledge	knowledge	NOUN
fuelectenerg-1260	345	10	in	in	ADP
fuelectenerg-1260	345	11	mems	mems	ADJ
fuelectenerg-1260	345	12	manufacturing	manufacturing	NOUN
fuelectenerg-1260	345	13	process	process	NOUN
fuelectenerg-1260	345	14	technologies	technology	NOUN
fuelectenerg-1260	345	15	and	and	CCONJ
fuelectenerg-1260	345	16	the	the	DET
fuelectenerg-1260	345	17	requirement	requirement	NOUN
fuelectenerg-1260	345	18	to	to	PART
fuelectenerg-1260	345	19	detach	detach	VERB
fuelectenerg-1260	345	20	the	the	DET
fuelectenerg-1260	345	21	mems	mem	NOUN
fuelectenerg-1260	345	22	design	design	NOUN
fuelectenerg-1260	345	23	from	from	ADP
fuelectenerg-1260	345	24	its	its	PRON
fuelectenerg-1260	345	25	fabrication	fabrication	NOUN
fuelectenerg-1260	345	26	.	.	PUNCT
fuelectenerg-1260	346	1	the	the	DET
fuelectenerg-1260	346	2	authors	author	NOUN
fuelectenerg-1260	346	3	have	have	AUX
fuelectenerg-1260	346	4	produced	produce	VERB
fuelectenerg-1260	346	5	a	a	DET
fuelectenerg-1260	346	6	partial	partial	ADJ
fuelectenerg-1260	346	7	software	software	NOUN
fuelectenerg-1260	346	8	prototype	prototype	NOUN
fuelectenerg-1260	346	9	;	;	PUNCT
fuelectenerg-1260	346	10	its	its	PRON
fuelectenerg-1260	346	11	output	output	NOUN
fuelectenerg-1260	346	12	produced	produce	VERB
fuelectenerg-1260	346	13	bond	bond	NOUN
fuelectenerg-1260	346	14	graphs	graph	NOUN
fuelectenerg-1260	346	15	.	.	PUNCT
fuelectenerg-1260	347	1	[	[	X
fuelectenerg-1260	347	2	68	68	NUM
fuelectenerg-1260	347	3	]	]	PUNCT
fuelectenerg-1260	347	4	.	.	PUNCT
fuelectenerg-1260	348	1	schröpfer	schröpfer	VERB
fuelectenerg-1260	348	2	et	et	PROPN
fuelectenerg-1260	348	3	al	al	PROPN
fuelectenerg-1260	348	4	.	.	PROPN
fuelectenerg-1260	348	5	went	go	VERB
fuelectenerg-1260	348	6	a	a	DET
fuelectenerg-1260	348	7	step	step	NOUN
fuelectenerg-1260	348	8	further	far	ADV
fuelectenerg-1260	348	9	and	and	CCONJ
fuelectenerg-1260	348	10	presented	present	VERB
fuelectenerg-1260	348	11	an	an	DET
fuelectenerg-1260	348	12	overview	overview	NOUN
fuelectenerg-1260	348	13	of	of	ADP
fuelectenerg-1260	348	14	different	different	ADJ
fuelectenerg-1260	348	15	modelling	modelling	NOUN
fuelectenerg-1260	348	16	levels	level	NOUN
fuelectenerg-1260	348	17	in	in	ADP
fuelectenerg-1260	348	18	mems	mem	NOUN
fuelectenerg-1260	348	19	and	and	CCONJ
fuelectenerg-1260	348	20	the	the	DET
fuelectenerg-1260	348	21	cad	cad	NOUN
fuelectenerg-1260	348	22	tools	tool	NOUN
fuelectenerg-1260	348	23	that	that	PRON
fuelectenerg-1260	348	24	are	be	AUX
fuelectenerg-1260	348	25	relevant	relevant	ADJ
fuelectenerg-1260	348	26	to	to	ADP
fuelectenerg-1260	348	27	these	these	DET
fuelectenerg-1260	348	28	modelling	modelling	NOUN
fuelectenerg-1260	348	29	levels	level	NOUN
fuelectenerg-1260	348	30	.	.	PUNCT
fuelectenerg-1260	349	1	it	it	PRON
fuelectenerg-1260	349	2	serves	serve	VERB
fuelectenerg-1260	349	3	both	both	DET
fuelectenerg-1260	349	4	mems	mem	NOUN
fuelectenerg-1260	349	5	and	and	CCONJ
fuelectenerg-1260	349	6	ic	ic	NUM
fuelectenerg-1260	349	7	designers	designer	NOUN
fuelectenerg-1260	349	8	.	.	PUNCT
fuelectenerg-1260	350	1	the	the	DET
fuelectenerg-1260	350	2	authors	author	NOUN
fuelectenerg-1260	350	3	also	also	ADV
fuelectenerg-1260	350	4	analyze	analyze	VERB
fuelectenerg-1260	350	5	the	the	DET
fuelectenerg-1260	350	6	differences	difference	NOUN
fuelectenerg-1260	350	7	and	and	CCONJ
fuelectenerg-1260	350	8	benefits	benefit	NOUN
fuelectenerg-1260	350	9	between	between	ADP
fuelectenerg-1260	350	10	their	their	PRON
fuelectenerg-1260	350	11	applied	apply	VERB
fuelectenerg-1260	350	12	behavioural	behavioural	ADJ
fuelectenerg-1260	350	13	modelling	modelling	NOUN
fuelectenerg-1260	350	14	and	and	CCONJ
fuelectenerg-1260	350	15	the	the	DET
fuelectenerg-1260	350	16	two	two	NUM
fuelectenerg-1260	350	17	popular	popular	ADJ
fuelectenerg-1260	350	18	modelling	modelling	NOUN
fuelectenerg-1260	350	19	with	with	ADP
fuelectenerg-1260	350	20	fea	fea	NOUN
fuelectenerg-1260	350	21	and	and	CCONJ
fuelectenerg-1260	350	22	boundary	boundary	ADJ
fuelectenerg-1260	350	23	element	element	NOUN
fuelectenerg-1260	350	24	method	method	NOUN
fuelectenerg-1260	350	25	(	(	PUNCT
fuelectenerg-1260	350	26	bem	bem	PROPN
fuelectenerg-1260	350	27	)	)	PUNCT
fuelectenerg-1260	350	28	.	.	PUNCT
fuelectenerg-1260	351	1	another	another	DET
fuelectenerg-1260	351	2	important	important	ADJ
fuelectenerg-1260	351	3	feature	feature	NOUN
fuelectenerg-1260	351	4	is	be	AUX
fuelectenerg-1260	351	5	the	the	DET
fuelectenerg-1260	351	6	use	use	NOUN
fuelectenerg-1260	351	7	of	of	ADP
fuelectenerg-1260	351	8	voxels	voxel	NOUN
fuelectenerg-1260	351	9	(	(	PUNCT
fuelectenerg-1260	351	10	think	think	NOUN
fuelectenerg-1260	351	11	of	of	ADP
fuelectenerg-1260	351	12	pixels	pixel	NOUN
fuelectenerg-1260	351	13	in	in	ADP
fuelectenerg-1260	351	14	3d	3d	NUM
fuelectenerg-1260	351	15	)	)	PUNCT
fuelectenerg-1260	351	16	instead	instead	ADV
fuelectenerg-1260	351	17	of	of	ADP
fuelectenerg-1260	351	18	pixels	pixel	NOUN
fuelectenerg-1260	351	19	for	for	ADP
fuelectenerg-1260	351	20	their	their	PRON
fuelectenerg-1260	351	21	displays	display	NOUN
fuelectenerg-1260	351	22	to	to	PART
fuelectenerg-1260	351	23	facilitate	facilitate	VERB
fuelectenerg-1260	351	24	3d	3d	NUM
fuelectenerg-1260	351	25	animations	animation	NOUN
fuelectenerg-1260	351	26	[	[	X
fuelectenerg-1260	351	27	69	69	NUM
fuelectenerg-1260	351	28	]	]	PUNCT
fuelectenerg-1260	351	29	.	.	PUNCT
fuelectenerg-1260	352	1	cecil	cecil	PROPN
fuelectenerg-1260	352	2	et	et	PROPN
fuelectenerg-1260	352	3	al	al	PROPN
fuelectenerg-1260	352	4	.	.	PROPN
fuelectenerg-1260	352	5	have	have	AUX
fuelectenerg-1260	352	6	proposed	propose	VERB
fuelectenerg-1260	352	7	a	a	DET
fuelectenerg-1260	352	8	virtual	virtual	ADJ
fuelectenerg-1260	352	9	reality	reality	NOUN
fuelectenerg-1260	352	10	-	-	PUNCT
fuelectenerg-1260	352	11	based	base	VERB
fuelectenerg-1260	352	12	environment	environment	NOUN
fuelectenerg-1260	352	13	for	for	ADP
fuelectenerg-1260	352	14	micro	micro	PROPN
fuelectenerg-1260	352	15	assembly	assembly	PROPN
fuelectenerg-1260	352	16	(	(	PUNCT
fuelectenerg-1260	352	17	vrem	vrem	PROPN
fuelectenerg-1260	352	18	)	)	PUNCT
fuelectenerg-1260	352	19	that	that	PRON
fuelectenerg-1260	352	20	is	be	AUX
fuelectenerg-1260	352	21	linked	link	VERB
fuelectenerg-1260	352	22	with	with	ADP
fuelectenerg-1260	352	23	the	the	DET
fuelectenerg-1260	352	24	physical	physical	ADJ
fuelectenerg-1260	352	25	manufacturing	manufacturing	NOUN
fuelectenerg-1260	352	26	.	.	PUNCT
fuelectenerg-1260	353	1	the	the	DET
fuelectenerg-1260	353	2	software	software	NOUN
fuelectenerg-1260	353	3	for	for	ADP
fuelectenerg-1260	353	4	the	the	DET
fuelectenerg-1260	353	5	vr	vr	PROPN
fuelectenerg-1260	353	6	environment	environment	NOUN
fuelectenerg-1260	353	7	mimics	mimic	VERB
fuelectenerg-1260	353	8	and	and	CCONJ
fuelectenerg-1260	353	9	displays	display	NOUN
fuelectenerg-1260	353	10	on	on	ADP
fuelectenerg-1260	353	11	screen	screen	NOUN
fuelectenerg-1260	353	12	the	the	DET
fuelectenerg-1260	353	13	tools	tool	NOUN
fuelectenerg-1260	353	14	and	and	CCONJ
fuelectenerg-1260	353	15	movements	movement	NOUN
fuelectenerg-1260	353	16	from	from	ADP
fuelectenerg-1260	353	17	the	the	DET
fuelectenerg-1260	353	18	point	point	NOUN
fuelectenerg-1260	353	19	view	view	NOUN
fuelectenerg-1260	353	20	of	of	ADP
fuelectenerg-1260	353	21	an	an	DET
fuelectenerg-1260	353	22	operator	operator	NOUN
fuelectenerg-1260	353	23	.	.	PUNCT
fuelectenerg-1260	354	1	an	an	DET
fuelectenerg-1260	354	2	automated	automate	VERB
fuelectenerg-1260	354	3	assembly	assembly	NOUN
fuelectenerg-1260	354	4	sequence	sequence	NOUN
fuelectenerg-1260	354	5	generator	generator	NOUN
fuelectenerg-1260	354	6	uses	use	VERB
fuelectenerg-1260	354	7	genetic	genetic	ADJ
fuelectenerg-1260	354	8	algorithms	algorithm	NOUN
fuelectenerg-1260	354	9	to	to	PART
fuelectenerg-1260	354	10	optimize	optimize	VERB
fuelectenerg-1260	354	11	assembly	assembly	NOUN
fuelectenerg-1260	354	12	sequences	sequence	NOUN
fuelectenerg-1260	354	13	.	.	PUNCT
fuelectenerg-1260	355	1	the	the	DET
fuelectenerg-1260	355	2	outcomes	outcome	NOUN
fuelectenerg-1260	355	3	from	from	ADP
fuelectenerg-1260	355	4	the	the	DET
fuelectenerg-1260	355	5	virtual	virtual	ADJ
fuelectenerg-1260	355	6	environment	environment	NOUN
fuelectenerg-1260	355	7	aim	aim	VERB
fuelectenerg-1260	355	8	to	to	PART
fuelectenerg-1260	355	9	produce	produce	VERB
fuelectenerg-1260	355	10	a	a	DET
fuelectenerg-1260	355	11	validated	validate	VERB
fuelectenerg-1260	355	12	schedule	schedule	NOUN
fuelectenerg-1260	355	13	for	for	ADP
fuelectenerg-1260	355	14	the	the	DET
fuelectenerg-1260	355	15	fabrication	fabrication	NOUN
fuelectenerg-1260	355	16	of	of	ADP
fuelectenerg-1260	355	17	a	a	DET
fuelectenerg-1260	355	18	mems	mem	NOUN
fuelectenerg-1260	355	19	,	,	PUNCT
fuelectenerg-1260	355	20	and	and	CCONJ
fuelectenerg-1260	355	21	the	the	DET
fuelectenerg-1260	355	22	assembly	assembly	NOUN
fuelectenerg-1260	355	23	instructions	instruction	NOUN
fuelectenerg-1260	355	24	for	for	ADP
fuelectenerg-1260	355	25	the	the	DET
fuelectenerg-1260	355	26	physical	physical	ADJ
fuelectenerg-1260	355	27	part	part	NOUN
fuelectenerg-1260	355	28	(	(	PUNCT
fuelectenerg-1260	355	29	tools	tool	NOUN
fuelectenerg-1260	355	30	and	and	CCONJ
fuelectenerg-1260	355	31	autonomous	autonomous	ADJ
fuelectenerg-1260	355	32	robots	robot	NOUN
fuelectenerg-1260	355	33	)	)	PUNCT
fuelectenerg-1260	355	34	to	to	PART
fuelectenerg-1260	355	35	be	be	AUX
fuelectenerg-1260	355	36	assembled	assemble	VERB
fuelectenerg-1260	355	37	by	by	ADP
fuelectenerg-1260	355	38	the	the	DET
fuelectenerg-1260	355	39	available	available	ADJ
fuelectenerg-1260	355	40	work	work	NOUN
fuelectenerg-1260	355	41	cell	cell	NOUN
fuelectenerg-1260	355	42	resources	resource	NOUN
fuelectenerg-1260	355	43	.	.	PUNCT
fuelectenerg-1260	356	1	some	some	DET
fuelectenerg-1260	356	2	examples	example	NOUN
fuelectenerg-1260	356	3	of	of	ADP
fuelectenerg-1260	356	4	vrem	vrem	NOUN
fuelectenerg-1260	356	5	are	be	AUX
fuelectenerg-1260	356	6	developed	develop	VERB
fuelectenerg-1260	356	7	as	as	ADP
fuelectenerg-1260	356	8	prototypes	prototype	NOUN
fuelectenerg-1260	356	9	[	[	X
fuelectenerg-1260	356	10	70	70	NUM
fuelectenerg-1260	356	11	]	]	PUNCT
fuelectenerg-1260	356	12	.	.	PUNCT
fuelectenerg-1260	357	1	despite	despite	SCONJ
fuelectenerg-1260	357	2	the	the	DET
fuelectenerg-1260	357	3	potential	potential	NOUN
fuelectenerg-1260	357	4	of	of	ADP
fuelectenerg-1260	357	5	current	current	ADJ
fuelectenerg-1260	357	6	computing	computing	NOUN
fuelectenerg-1260	357	7	power	power	NOUN
fuelectenerg-1260	357	8	,	,	PUNCT
fuelectenerg-1260	357	9	the	the	DET
fuelectenerg-1260	357	10	availability	availability	NOUN
fuelectenerg-1260	357	11	of	of	ADP
fuelectenerg-1260	357	12	virtual	virtual	ADJ
fuelectenerg-1260	357	13	reality	reality	NOUN
fuelectenerg-1260	357	14	with	with	ADP
fuelectenerg-1260	357	15	animations	animation	NOUN
fuelectenerg-1260	357	16	is	be	AUX
fuelectenerg-1260	357	17	still	still	ADV
fuelectenerg-1260	357	18	non	non	ADJ
fuelectenerg-1260	357	19	-	-	ADJ
fuelectenerg-1260	357	20	existent	existent	ADJ
fuelectenerg-1260	357	21	or	or	CCONJ
fuelectenerg-1260	357	22	very	very	ADV
fuelectenerg-1260	357	23	limited	limited	ADJ
fuelectenerg-1260	357	24	for	for	ADP
fuelectenerg-1260	357	25	mems	mem	NOUN
fuelectenerg-1260	357	26	.	.	PUNCT
fuelectenerg-1260	358	1	in	in	ADP
fuelectenerg-1260	358	2	2001	2001	NUM
fuelectenerg-1260	358	3	we	we	PRON
fuelectenerg-1260	358	4	initiated	initiate	VERB
fuelectenerg-1260	358	5	our	our	PRON
fuelectenerg-1260	358	6	mems	mem	NOUN
fuelectenerg-1260	358	7	animated	animate	VERB
fuelectenerg-1260	358	8	graphic	graphic	ADJ
fuelectenerg-1260	358	9	design	design	NOUN
fuelectenerg-1260	358	10	aid	aid	NOUN
fuelectenerg-1260	358	11	(	(	PUNCT
fuelectenerg-1260	358	12	magda	magda	NOUN
fuelectenerg-1260	358	13	)	)	PUNCT
fuelectenerg-1260	358	14	project	project	NOUN
fuelectenerg-1260	358	15	[	[	X
fuelectenerg-1260	358	16	71	71	NUM
fuelectenerg-1260	358	17	]	]	PUNCT
fuelectenerg-1260	358	18	.	.	PUNCT
fuelectenerg-1260	359	1	this	this	DET
fuelectenerg-1260	359	2	project	project	NOUN
fuelectenerg-1260	359	3	is	be	AUX
fuelectenerg-1260	359	4	summarized	summarize	VERB
fuelectenerg-1260	359	5	below	below	ADP
fuelectenerg-1260	359	6	and	and	CCONJ
fuelectenerg-1260	359	7	specific	specific	ADJ
fuelectenerg-1260	359	8	example	example	NOUN
fuelectenerg-1260	359	9	shown	show	VERB
fuelectenerg-1260	359	10	further	far	ADV
fuelectenerg-1260	359	11	down	down	ADV
fuelectenerg-1260	359	12	.	.	PUNCT
fuelectenerg-1260	360	1	magda	magda	PROPN
fuelectenerg-1260	360	2	aims	aim	VERB
fuelectenerg-1260	360	3	for	for	ADP
fuelectenerg-1260	360	4	starting	start	VERB
fuelectenerg-1260	360	5	design	design	NOUN
fuelectenerg-1260	360	6	templates	template	NOUN
fuelectenerg-1260	360	7	for	for	ADP
fuelectenerg-1260	360	8	structures	structure	NOUN
fuelectenerg-1260	360	9	of	of	ADP
fuelectenerg-1260	360	10	mems	mem	NOUN
fuelectenerg-1260	360	11	.	.	PUNCT
fuelectenerg-1260	361	1	these	these	DET
fuelectenerg-1260	361	2	design	design	NOUN
fuelectenerg-1260	361	3	templates	template	NOUN
fuelectenerg-1260	361	4	give	give	VERB
fuelectenerg-1260	361	5	priority	priority	NOUN
fuelectenerg-1260	361	6	to	to	ADP
fuelectenerg-1260	361	7	those	those	DET
fuelectenerg-1260	361	8	parameters	parameter	NOUN
fuelectenerg-1260	361	9	that	that	PRON
fuelectenerg-1260	361	10	are	be	AUX
fuelectenerg-1260	361	11	most	most	ADV
fuelectenerg-1260	361	12	sensitive	sensitive	ADJ
fuelectenerg-1260	361	13	in	in	ADP
fuelectenerg-1260	361	14	the	the	DET
fuelectenerg-1260	361	15	proper	proper	ADJ
fuelectenerg-1260	361	16	functioning	functioning	NOUN
fuelectenerg-1260	361	17	of	of	ADP
fuelectenerg-1260	361	18	the	the	DET
fuelectenerg-1260	361	19	mems	mem	NOUN
fuelectenerg-1260	361	20	.	.	PUNCT
fuelectenerg-1260	362	1	it	it	PRON
fuelectenerg-1260	362	2	aims	aim	VERB
fuelectenerg-1260	362	3	to	to	PART
fuelectenerg-1260	362	4	provide	provide	VERB
fuelectenerg-1260	362	5	a	a	DET
fuelectenerg-1260	362	6	library	library	NOUN
fuelectenerg-1260	362	7	with	with	ADP
fuelectenerg-1260	362	8	typical	typical	ADJ
fuelectenerg-1260	362	9	designs	design	NOUN
fuelectenerg-1260	362	10	that	that	PRON
fuelectenerg-1260	362	11	can	can	AUX
fuelectenerg-1260	362	12	be	be	AUX
fuelectenerg-1260	362	13	changed	change	VERB
fuelectenerg-1260	362	14	further	far	ADV
fuelectenerg-1260	362	15	in	in	ADP
fuelectenerg-1260	362	16	a	a	DET
fuelectenerg-1260	362	17	similar	similar	ADJ
fuelectenerg-1260	362	18	way	way	NOUN
fuelectenerg-1260	362	19	as	as	ADP
fuelectenerg-1260	362	20	dewey	dewey	PROPN
fuelectenerg-1260	362	21	et	et	PROPN
fuelectenerg-1260	362	22	al	al	PROPN
fuelectenerg-1260	362	23	.	.	PROPN
fuelectenerg-1260	363	1	did	do	VERB
fuelectenerg-1260	363	2	in	in	ADP
fuelectenerg-1260	363	3	their	their	PRON
fuelectenerg-1260	363	4	project	project	NOUN
fuelectenerg-1260	363	5	visual	visual	ADJ
fuelectenerg-1260	363	6	integrated	integrate	VERB
fuelectenerg-1260	363	7	-	-	PUNCT
fuelectenerg-1260	363	8	microelectromechanical	microelectromechanical	ADJ
fuelectenerg-1260	363	9	vhdl	vhdl	PROPN
fuelectenerg-1260	363	10	-	-	PUNCT
fuelectenerg-1260	363	11	ams	ams	PROPN
fuelectenerg-1260	363	12	interactive	interactive	ADJ
fuelectenerg-1260	363	13	design	design	NOUN
fuelectenerg-1260	363	14	,	,	PUNCT
fuelectenerg-1260	363	15	vivid	vivid	ADJ
fuelectenerg-1260	363	16	[	[	X
fuelectenerg-1260	363	17	38	38	NUM
fuelectenerg-1260	363	18	]	]	PUNCT
fuelectenerg-1260	363	19	.	.	PUNCT
fuelectenerg-1260	364	1	the	the	DET
fuelectenerg-1260	364	2	difference	difference	NOUN
fuelectenerg-1260	364	3	is	be	AUX
fuelectenerg-1260	364	4	that	that	SCONJ
fuelectenerg-1260	364	5	our	our	PRON
fuelectenerg-1260	364	6	starting	starting	NOUN
fuelectenerg-1260	364	7	point	point	NOUN
fuelectenerg-1260	364	8	is	be	AUX
fuelectenerg-1260	364	9	based	base	VERB
fuelectenerg-1260	364	10	on	on	ADP
fuelectenerg-1260	364	11	theoretical	theoretical	ADJ
fuelectenerg-1260	364	12	mems	mem	NOUN
fuelectenerg-1260	364	13	whose	whose	DET
fuelectenerg-1260	364	14	design	design	NOUN
fuelectenerg-1260	364	15	templates	template	NOUN
fuelectenerg-1260	364	16	summarize	summarize	VERB
fuelectenerg-1260	364	17	the	the	DET
fuelectenerg-1260	364	18	features	feature	NOUN
fuelectenerg-1260	364	19	of	of	ADP
fuelectenerg-1260	364	20	typical	typical	ADJ
fuelectenerg-1260	364	21	classes	class	NOUN
fuelectenerg-1260	364	22	of	of	ADP
fuelectenerg-1260	364	23	mems	mem	NOUN
fuelectenerg-1260	364	24	.	.	PUNCT
fuelectenerg-1260	365	1	this	this	PRON
fuelectenerg-1260	365	2	provides	provide	VERB
fuelectenerg-1260	365	3	a	a	DET
fuelectenerg-1260	365	4	more	more	ADV
fuelectenerg-1260	365	5	general	general	ADJ
fuelectenerg-1260	365	6	starting	starting	NOUN
fuelectenerg-1260	365	7	point	point	NOUN
fuelectenerg-1260	365	8	with	with	ADP
fuelectenerg-1260	365	9	more	more	ADJ
fuelectenerg-1260	365	10	freedom	freedom	NOUN
fuelectenerg-1260	365	11	,	,	PUNCT
fuelectenerg-1260	365	12	while	while	SCONJ
fuelectenerg-1260	365	13	in	in	ADP
fuelectenerg-1260	365	14	vivid	vivid	ADJ
fuelectenerg-1260	365	15	only	only	ADV
fuelectenerg-1260	365	16	those	those	DET
fuelectenerg-1260	365	17	designs	design	NOUN
fuelectenerg-1260	365	18	that	that	PRON
fuelectenerg-1260	365	19	are	be	AUX
fuelectenerg-1260	365	20	available	available	ADJ
fuelectenerg-1260	365	21	from	from	ADP
fuelectenerg-1260	365	22	the	the	DET
fuelectenerg-1260	365	23	foundry	foundry	NOUN
fuelectenerg-1260	365	24	cell	cell	NOUN
fuelectenerg-1260	365	25	libraries	library	NOUN
fuelectenerg-1260	365	26	provided	provide	VERB
fuelectenerg-1260	365	27	by	by	ADP
fuelectenerg-1260	365	28	the	the	DET
fuelectenerg-1260	365	29	designers	designer	NOUN
fuelectenerg-1260	365	30	of	of	ADP
fuelectenerg-1260	365	31	the	the	DET
fuelectenerg-1260	365	32	software	software	NOUN
fuelectenerg-1260	365	33	can	can	AUX
fuelectenerg-1260	365	34	be	be	AUX
fuelectenerg-1260	365	35	used	use	VERB
fuelectenerg-1260	365	36	.	.	PUNCT
fuelectenerg-1260	366	1	our	our	PRON
fuelectenerg-1260	366	2	motivation	motivation	NOUN
fuelectenerg-1260	366	3	for	for	ADP
fuelectenerg-1260	366	4	our	our	PRON
fuelectenerg-1260	366	5	more	more	ADV
fuelectenerg-1260	366	6	generic	generic	ADJ
fuelectenerg-1260	366	7	template	template	NOUN
fuelectenerg-1260	366	8	is	be	AUX
fuelectenerg-1260	366	9	to	to	PART
fuelectenerg-1260	366	10	start	start	VERB
fuelectenerg-1260	366	11	with	with	ADP
fuelectenerg-1260	366	12	a	a	DET
fuelectenerg-1260	366	13	“	"	PUNCT
fuelectenerg-1260	366	14	feasible	feasible	ADJ
fuelectenerg-1260	366	15	”	"	PUNCT
fuelectenerg-1260	366	16	mems	mem	NOUN
fuelectenerg-1260	366	17	.	.	PUNCT
fuelectenerg-1260	367	1	we	we	PRON
fuelectenerg-1260	367	2	use	use	VERB
fuelectenerg-1260	367	3	chua	chua	PROPN
fuelectenerg-1260	367	4	’s	’s	PART
fuelectenerg-1260	367	5	notion	notion	NOUN
fuelectenerg-1260	367	6	of	of	ADP
fuelectenerg-1260	367	7	“	"	PUNCT
fuelectenerg-1260	367	8	local	local	ADJ
fuelectenerg-1260	367	9	activity	activity	NOUN
fuelectenerg-1260	367	10	”	"	PUNCT
fuelectenerg-1260	368	1	[	[	X
fuelectenerg-1260	368	2	72	72	NUM
fuelectenerg-1260	368	3	]	]	PUNCT
fuelectenerg-1260	368	4	to	to	PART
fuelectenerg-1260	368	5	step	step	VERB
fuelectenerg-1260	368	6	into	into	ADP
fuelectenerg-1260	368	7	the	the	DET
fuelectenerg-1260	368	8	design	design	NOUN
fuelectenerg-1260	368	9	of	of	ADP
fuelectenerg-1260	368	10	a	a	DET
fuelectenerg-1260	368	11	mems	mem	NOUN
fuelectenerg-1260	368	12	,	,	PUNCT
fuelectenerg-1260	368	13	whose	whose	DET
fuelectenerg-1260	368	14	internal	internal	ADJ
fuelectenerg-1260	368	15	complexity	complexity	NOUN
fuelectenerg-1260	368	16	(	(	PUNCT
fuelectenerg-1260	368	17	hence	hence	ADV
fuelectenerg-1260	368	18	its	its	PRON
fuelectenerg-1260	368	19	detailed	detailed	ADJ
fuelectenerg-1260	368	20	mathematical	mathematical	ADJ
fuelectenerg-1260	368	21	modelling	modelling	NOUN
fuelectenerg-1260	368	22	)	)	PUNCT
fuelectenerg-1260	368	23	can	can	AUX
fuelectenerg-1260	368	24	be	be	AUX
fuelectenerg-1260	368	25	deferred	defer	VERB
fuelectenerg-1260	368	26	for	for	ADP
fuelectenerg-1260	368	27	a	a	DET
fuelectenerg-1260	368	28	subsequent	subsequent	ADJ
fuelectenerg-1260	368	29	stage	stage	NOUN
fuelectenerg-1260	368	30	of	of	ADP
fuelectenerg-1260	368	31	fine	fine	ADV
fuelectenerg-1260	368	32	-	-	PUNCT
fuelectenerg-1260	368	33	tuning	tuning	NOUN
fuelectenerg-1260	368	34	.	.	PUNCT
fuelectenerg-1260	369	1	this	this	PRON
fuelectenerg-1260	369	2	is	be	AUX
fuelectenerg-1260	369	3	important	important	ADJ
fuelectenerg-1260	369	4	to	to	PART
fuelectenerg-1260	369	5	bring	bring	VERB
fuelectenerg-1260	369	6	mems	mem	NOUN
fuelectenerg-1260	369	7	design	design	NOUN
fuelectenerg-1260	369	8	closer	close	ADV
fuelectenerg-1260	369	9	to	to	ADP
fuelectenerg-1260	369	10	the	the	DET
fuelectenerg-1260	369	11	less	less	ADV
fuelectenerg-1260	369	12	specialized	specialized	ADJ
fuelectenerg-1260	369	13	and	and	CCONJ
fuelectenerg-1260	369	14	novices	novice	NOUN
fuelectenerg-1260	369	15	,	,	PUNCT
fuelectenerg-1260	369	16	and	and	CCONJ
fuelectenerg-1260	369	17	still	still	ADV
fuelectenerg-1260	369	18	offer	offer	VERB
fuelectenerg-1260	369	19	(	(	PUNCT
fuelectenerg-1260	369	20	albeit	albeit	SCONJ
fuelectenerg-1260	369	21	limited	limited	ADJ
fuelectenerg-1260	369	22	)	)	PUNCT
fuelectenerg-1260	369	23	understanding	understanding	NOUN
fuelectenerg-1260	369	24	and	and	CCONJ
fuelectenerg-1260	369	25	learning	learning	NOUN
fuelectenerg-1260	369	26	of	of	ADP
fuelectenerg-1260	369	27	cause	cause	NOUN
fuelectenerg-1260	369	28	and	and	CCONJ
fuelectenerg-1260	369	29	effect	effect	NOUN
fuelectenerg-1260	369	30	in	in	ADP
fuelectenerg-1260	369	31	mems	mems	ADJ
fuelectenerg-1260	369	32	parameters	parameter	NOUN
fuelectenerg-1260	369	33	.	.	PUNCT
fuelectenerg-1260	370	1	mems	mem	NOUN
fuelectenerg-1260	370	2	design	design	NOUN
fuelectenerg-1260	370	3	simplification	simplification	NOUN
fuelectenerg-1260	370	4	with	with	ADP
fuelectenerg-1260	370	5	virtual	virtual	ADJ
fuelectenerg-1260	370	6	prototyping	prototype	VERB
fuelectenerg-1260	370	7	23	23	NUM
fuelectenerg-1260	370	8	6	6	NUM
fuelectenerg-1260	370	9	.	.	PUNCT
fuelectenerg-1260	371	1	the	the	DET
fuelectenerg-1260	371	2	magda	magda	PROPN
fuelectenerg-1260	371	3	project	project	NOUN
fuelectenerg-1260	371	4	mems	mems	PROPN
fuelectenerg-1260	371	5	animated	animate	VERB
fuelectenerg-1260	371	6	graphic	graphic	ADJ
fuelectenerg-1260	371	7	design	design	NOUN
fuelectenerg-1260	371	8	aid	aid	NOUN
fuelectenerg-1260	371	9	(	(	PUNCT
fuelectenerg-1260	371	10	magda	magda	PROPN
fuelectenerg-1260	371	11	)	)	PUNCT
fuelectenerg-1260	371	12	is	be	AUX
fuelectenerg-1260	371	13	our	our	PRON
fuelectenerg-1260	371	14	virtual	virtual	ADJ
fuelectenerg-1260	371	15	prototyping	prototyping	NOUN
fuelectenerg-1260	371	16	project	project	NOUN
fuelectenerg-1260	371	17	that	that	PRON
fuelectenerg-1260	371	18	aims	aim	VERB
fuelectenerg-1260	371	19	at	at	ADP
fuelectenerg-1260	371	20	building	build	VERB
fuelectenerg-1260	371	21	a	a	DET
fuelectenerg-1260	371	22	simulation	simulation	NOUN
fuelectenerg-1260	371	23	environment	environment	NOUN
fuelectenerg-1260	371	24	to	to	PART
fuelectenerg-1260	371	25	aid	aid	VERB
fuelectenerg-1260	371	26	in	in	ADP
fuelectenerg-1260	371	27	the	the	DET
fuelectenerg-1260	371	28	design	design	NOUN
fuelectenerg-1260	371	29	of	of	ADP
fuelectenerg-1260	371	30	mems	mem	NOUN
fuelectenerg-1260	371	31	.	.	PUNCT
fuelectenerg-1260	372	1	the	the	DET
fuelectenerg-1260	372	2	purpose	purpose	NOUN
fuelectenerg-1260	372	3	of	of	ADP
fuelectenerg-1260	372	4	magda	magda	PROPN
fuelectenerg-1260	372	5	is	be	AUX
fuelectenerg-1260	372	6	to	to	PART
fuelectenerg-1260	372	7	overcome	overcome	VERB
fuelectenerg-1260	372	8	the	the	DET
fuelectenerg-1260	372	9	weaknesses	weakness	NOUN
fuelectenerg-1260	372	10	of	of	ADP
fuelectenerg-1260	372	11	commercially	commercially	ADV
fuelectenerg-1260	372	12	available	available	ADJ
fuelectenerg-1260	372	13	cad	cad	PROPN
fuelectenerg-1260	372	14	software	software	NOUN
fuelectenerg-1260	372	15	.	.	PUNCT
fuelectenerg-1260	373	1	specifically	specifically	ADV
fuelectenerg-1260	373	2	,	,	PUNCT
fuelectenerg-1260	373	3	it	it	PRON
fuelectenerg-1260	373	4	aims	aim	VERB
fuelectenerg-1260	373	5	to	to	PART
fuelectenerg-1260	373	6	overcome	overcome	VERB
fuelectenerg-1260	373	7	the	the	DET
fuelectenerg-1260	373	8	weakness	weakness	NOUN
fuelectenerg-1260	373	9	in	in	ADP
fuelectenerg-1260	373	10	interface	interface	NOUN
fuelectenerg-1260	373	11	usability	usability	NOUN
fuelectenerg-1260	373	12	,	,	PUNCT
fuelectenerg-1260	373	13	by	by	ADP
fuelectenerg-1260	373	14	simulating	simulate	VERB
fuelectenerg-1260	373	15	the	the	DET
fuelectenerg-1260	373	16	functioning	functioning	NOUN
fuelectenerg-1260	373	17	of	of	ADP
fuelectenerg-1260	373	18	mems	mem	NOUN
fuelectenerg-1260	373	19	interactively	interactively	ADV
fuelectenerg-1260	373	20	,	,	PUNCT
fuelectenerg-1260	373	21	and	and	CCONJ
fuelectenerg-1260	373	22	by	by	ADP
fuelectenerg-1260	373	23	producing	produce	VERB
fuelectenerg-1260	373	24	animated	animate	VERB
fuelectenerg-1260	373	25	vr	vr	NOUN
fuelectenerg-1260	373	26	visualizations	visualization	NOUN
fuelectenerg-1260	373	27	.	.	PUNCT
fuelectenerg-1260	374	1	it	it	PRON
fuelectenerg-1260	374	2	aims	aim	VERB
fuelectenerg-1260	374	3	at	at	ADP
fuelectenerg-1260	374	4	contributing	contribute	VERB
fuelectenerg-1260	374	5	in	in	ADP
fuelectenerg-1260	374	6	a	a	DET
fuelectenerg-1260	374	7	similar	similar	ADJ
fuelectenerg-1260	374	8	way	way	NOUN
fuelectenerg-1260	374	9	to	to	ADP
fuelectenerg-1260	374	10	the	the	DET
fuelectenerg-1260	374	11	mems	mem	NOUN
fuelectenerg-1260	374	12	industry	industry	NOUN
fuelectenerg-1260	374	13	as	as	SCONJ
fuelectenerg-1260	374	14	the	the	DET
fuelectenerg-1260	374	15	introduction	introduction	NOUN
fuelectenerg-1260	374	16	of	of	ADP
fuelectenerg-1260	374	17	cad	cad	PROPN
fuelectenerg-1260	374	18	packages	package	NOUN
fuelectenerg-1260	374	19	was	be	AUX
fuelectenerg-1260	374	20	a	a	DET
fuelectenerg-1260	374	21	critical	critical	ADJ
fuelectenerg-1260	374	22	step	step	NOUN
fuelectenerg-1260	374	23	in	in	ADP
fuelectenerg-1260	374	24	the	the	DET
fuelectenerg-1260	374	25	widespread	widespread	ADJ
fuelectenerg-1260	374	26	development	development	NOUN
fuelectenerg-1260	374	27	of	of	ADP
fuelectenerg-1260	374	28	vlsi	vlsi	PROPN
fuelectenerg-1260	374	29	.	.	PUNCT
fuelectenerg-1260	375	1	in	in	ADP
fuelectenerg-1260	375	2	its	its	PRON
fuelectenerg-1260	375	3	implementation	implementation	NOUN
fuelectenerg-1260	375	4	,	,	PUNCT
fuelectenerg-1260	375	5	magda	magda	PROPN
fuelectenerg-1260	375	6	acts	act	VERB
fuelectenerg-1260	375	7	as	as	ADP
fuelectenerg-1260	375	8	a	a	DET
fuelectenerg-1260	375	9	layer	layer	NOUN
fuelectenerg-1260	375	10	between	between	ADP
fuelectenerg-1260	375	11	the	the	DET
fuelectenerg-1260	375	12	user	user	NOUN
fuelectenerg-1260	375	13	and	and	CCONJ
fuelectenerg-1260	375	14	existing	exist	VERB
fuelectenerg-1260	375	15	cad	cad	NOUN
fuelectenerg-1260	375	16	solvers	solver	NOUN
fuelectenerg-1260	375	17	currently	currently	ADV
fuelectenerg-1260	375	18	used	use	VERB
fuelectenerg-1260	375	19	in	in	ADP
fuelectenerg-1260	375	20	mems	mem	NOUN
fuelectenerg-1260	375	21	design	design	NOUN
fuelectenerg-1260	375	22	,	,	PUNCT
fuelectenerg-1260	375	23	with	with	ADP
fuelectenerg-1260	375	24	a	a	DET
fuelectenerg-1260	375	25	capability	capability	NOUN
fuelectenerg-1260	375	26	for	for	ADP
fuelectenerg-1260	375	27	calculations	calculation	NOUN
fuelectenerg-1260	375	28	on	on	ADP
fuelectenerg-1260	375	29	its	its	PRON
fuelectenerg-1260	375	30	own	own	ADJ
fuelectenerg-1260	375	31	.	.	PUNCT
fuelectenerg-1260	376	1	figure	figure	NOUN
fuelectenerg-1260	376	2	1	1	NUM
fuelectenerg-1260	376	3	shows	show	VERB
fuelectenerg-1260	376	4	the	the	DET
fuelectenerg-1260	376	5	basic	basic	ADJ
fuelectenerg-1260	376	6	organization	organization	NOUN
fuelectenerg-1260	376	7	of	of	ADP
fuelectenerg-1260	376	8	magda	magda	PROPN
fuelectenerg-1260	376	9	magda	magda	PROPN
fuelectenerg-1260	376	10	is	be	AUX
fuelectenerg-1260	376	11	an	an	DET
fuelectenerg-1260	376	12	ambitious	ambitious	ADJ
fuelectenerg-1260	376	13	project	project	NOUN
fuelectenerg-1260	376	14	that	that	PRON
fuelectenerg-1260	376	15	was	be	AUX
fuelectenerg-1260	376	16	initiated	initiate	VERB
fuelectenerg-1260	376	17	in	in	ADP
fuelectenerg-1260	376	18	2001	2001	NUM
fuelectenerg-1260	376	19	.	.	PUNCT
fuelectenerg-1260	377	1	it	it	PRON
fuelectenerg-1260	377	2	has	have	AUX
fuelectenerg-1260	377	3	attracted	attract	VERB
fuelectenerg-1260	377	4	postgraduate	postgraduate	ADJ
fuelectenerg-1260	377	5	students	student	NOUN
fuelectenerg-1260	377	6	and	and	CCONJ
fuelectenerg-1260	377	7	international	international	ADJ
fuelectenerg-1260	377	8	exchange	exchange	NOUN
fuelectenerg-1260	377	9	students	student	NOUN
fuelectenerg-1260	377	10	for	for	ADP
fuelectenerg-1260	377	11	research	research	NOUN
fuelectenerg-1260	377	12	and	and	CCONJ
fuelectenerg-1260	377	13	implementation	implementation	NOUN
fuelectenerg-1260	377	14	.	.	PUNCT
fuelectenerg-1260	378	1	to	to	PART
fuelectenerg-1260	378	2	illustrate	illustrate	VERB
fuelectenerg-1260	378	3	why	why	SCONJ
fuelectenerg-1260	378	4	it	it	PRON
fuelectenerg-1260	378	5	is	be	AUX
fuelectenerg-1260	378	6	an	an	DET
fuelectenerg-1260	378	7	ambitious	ambitious	ADJ
fuelectenerg-1260	378	8	project	project	NOUN
fuelectenerg-1260	378	9	,	,	PUNCT
fuelectenerg-1260	378	10	we	we	PRON
fuelectenerg-1260	378	11	look	look	VERB
fuelectenerg-1260	378	12	at	at	ADP
fuelectenerg-1260	378	13	collision	collision	NOUN
fuelectenerg-1260	378	14	detection	detection	NOUN
fuelectenerg-1260	378	15	that	that	PRON
fuelectenerg-1260	378	16	is	be	AUX
fuelectenerg-1260	378	17	suitable	suitable	ADJ
fuelectenerg-1260	378	18	amongst	amongst	ADP
fuelectenerg-1260	378	19	the	the	DET
fuelectenerg-1260	378	20	many	many	ADJ
fuelectenerg-1260	378	21	collision	collision	NOUN
fuelectenerg-1260	378	22	detection	detection	NOUN
fuelectenerg-1260	378	23	algorithms	algorithm	NOUN
fuelectenerg-1260	378	24	.	.	PUNCT
fuelectenerg-1260	379	1	what	what	PRON
fuelectenerg-1260	379	2	adds	adds	AUX
fuelectenerg-1260	379	3	appeal	appeal	VERB
fuelectenerg-1260	379	4	to	to	ADP
fuelectenerg-1260	379	5	it	it	PRON
fuelectenerg-1260	379	6	is	be	AUX
fuelectenerg-1260	379	7	the	the	DET
fuelectenerg-1260	379	8	vr	vr	NOUN
fuelectenerg-1260	379	9	placing	placing	NOUN
fuelectenerg-1260	379	10	of	of	ADP
fuelectenerg-1260	379	11	different	different	ADJ
fuelectenerg-1260	379	12	shapes	shape	NOUN
fuelectenerg-1260	379	13	in	in	ADP
fuelectenerg-1260	379	14	different	different	ADJ
fuelectenerg-1260	379	15	conditions	condition	NOUN
fuelectenerg-1260	379	16	and	and	CCONJ
fuelectenerg-1260	379	17	arrangements	arrangement	NOUN
fuelectenerg-1260	379	18	,	,	PUNCT
fuelectenerg-1260	379	19	for	for	ADP
fuelectenerg-1260	379	20	example	example	NOUN
fuelectenerg-1260	379	21	modelling	model	VERB
fuelectenerg-1260	379	22	a	a	DET
fuelectenerg-1260	379	23	gear	gear	NOUN
fuelectenerg-1260	379	24	or	or	CCONJ
fuelectenerg-1260	379	25	a	a	DET
fuelectenerg-1260	379	26	spring	spring	NOUN
fuelectenerg-1260	379	27	into	into	ADP
fuelectenerg-1260	379	28	a	a	DET
fuelectenerg-1260	379	29	device	device	NOUN
fuelectenerg-1260	379	30	being	be	AUX
fuelectenerg-1260	379	31	assembled	assemble	VERB
fuelectenerg-1260	379	32	.	.	PUNCT
fuelectenerg-1260	380	1	magda	magda	NOUN
fuelectenerg-1260	380	2	is	be	AUX
fuelectenerg-1260	380	3	about	about	ADP
fuelectenerg-1260	380	4	the	the	DET
fuelectenerg-1260	380	5	manufacturability	manufacturability	NOUN
fuelectenerg-1260	380	6	,	,	PUNCT
fuelectenerg-1260	380	7	which	which	PRON
fuelectenerg-1260	380	8	impacts	impact	VERB
fuelectenerg-1260	380	9	on	on	ADP
fuelectenerg-1260	380	10	the	the	DET
fuelectenerg-1260	380	11	suitability	suitability	NOUN
fuelectenerg-1260	380	12	of	of	ADP
fuelectenerg-1260	380	13	models	model	NOUN
fuelectenerg-1260	380	14	that	that	PRON
fuelectenerg-1260	380	15	can	can	AUX
fuelectenerg-1260	380	16	be	be	AUX
fuelectenerg-1260	380	17	used	use	VERB
fuelectenerg-1260	380	18	;	;	PUNCT
fuelectenerg-1260	380	19	it	it	PRON
fuelectenerg-1260	380	20	does	do	AUX
fuelectenerg-1260	380	21	neither	neither	CCONJ
fuelectenerg-1260	380	22	use	use	VERB
fuelectenerg-1260	380	23	nor	nor	CCONJ
fuelectenerg-1260	380	24	replace	replace	VERB
fuelectenerg-1260	380	25	existing	exist	VERB
fuelectenerg-1260	380	26	commercial	commercial	ADJ
fuelectenerg-1260	380	27	products	product	NOUN
fuelectenerg-1260	380	28	or	or	CCONJ
fuelectenerg-1260	380	29	finite	finite	ADJ
fuelectenerg-1260	380	30	element	element	NOUN
fuelectenerg-1260	380	31	calculations	calculation	NOUN
fuelectenerg-1260	380	32	.	.	PUNCT
fuelectenerg-1260	381	1	the	the	DET
fuelectenerg-1260	381	2	objective	objective	NOUN
fuelectenerg-1260	381	3	of	of	ADP
fuelectenerg-1260	381	4	magda	magda	PROPN
fuelectenerg-1260	381	5	is	be	AUX
fuelectenerg-1260	381	6	to	to	PART
fuelectenerg-1260	381	7	calculate	calculate	VERB
fuelectenerg-1260	381	8	faster	fast	ADV
fuelectenerg-1260	381	9	for	for	SCONJ
fuelectenerg-1260	381	10	interactive	interactive	ADJ
fuelectenerg-1260	381	11	early	early	ADJ
fuelectenerg-1260	381	12	design	design	NOUN
fuelectenerg-1260	381	13	and	and	CCONJ
fuelectenerg-1260	381	14	narrowing	narrow	VERB
fuelectenerg-1260	381	15	to	to	ADP
fuelectenerg-1260	381	16	a	a	DET
fuelectenerg-1260	381	17	desired	desire	VERB
fuelectenerg-1260	381	18	range	range	NOUN
fuelectenerg-1260	381	19	of	of	ADP
fuelectenerg-1260	381	20	parameters	parameter	NOUN
fuelectenerg-1260	381	21	and	and	CCONJ
fuelectenerg-1260	381	22	functionality	functionality	NOUN
fuelectenerg-1260	381	23	towards	towards	ADP
fuelectenerg-1260	381	24	a	a	DET
fuelectenerg-1260	381	25	prototype	prototype	NOUN
fuelectenerg-1260	381	26	.	.	PUNCT
fuelectenerg-1260	382	1	the	the	DET
fuelectenerg-1260	382	2	result	result	NOUN
fuelectenerg-1260	382	3	of	of	ADP
fuelectenerg-1260	382	4	magda	magda	PROPN
fuelectenerg-1260	382	5	can	can	AUX
fuelectenerg-1260	382	6	then	then	ADV
fuelectenerg-1260	382	7	be	be	AUX
fuelectenerg-1260	382	8	used	use	VERB
fuelectenerg-1260	382	9	for	for	ADP
fuelectenerg-1260	382	10	further	further	ADJ
fuelectenerg-1260	382	11	fine	fine	ADJ
fuelectenerg-1260	382	12	tuning	tuning	NOUN
fuelectenerg-1260	382	13	with	with	ADP
fuelectenerg-1260	382	14	finite	finite	ADJ
fuelectenerg-1260	382	15	elements	element	NOUN
fuelectenerg-1260	382	16	or	or	CCONJ
fuelectenerg-1260	382	17	other	other	ADJ
fuelectenerg-1260	382	18	mathematical	mathematical	ADJ
fuelectenerg-1260	382	19	models	model	NOUN
fuelectenerg-1260	382	20	.	.	PUNCT
fuelectenerg-1260	383	1	this	this	DET
fuelectenerg-1260	383	2	system	system	NOUN
fuelectenerg-1260	383	3	must	must	AUX
fuelectenerg-1260	383	4	have	have	VERB
fuelectenerg-1260	383	5	several	several	ADJ
fuelectenerg-1260	383	6	major	major	ADJ
fuelectenerg-1260	383	7	components	component	NOUN
fuelectenerg-1260	383	8	that	that	PRON
fuelectenerg-1260	383	9	are	be	AUX
fuelectenerg-1260	383	10	interrelated	interrelate	VERB
fuelectenerg-1260	383	11	with	with	ADP
fuelectenerg-1260	383	12	each	each	DET
fuelectenerg-1260	383	13	other	other	ADJ
fuelectenerg-1260	383	14	.	.	PUNCT
fuelectenerg-1260	384	1	for	for	ADP
fuelectenerg-1260	384	2	the	the	DET
fuelectenerg-1260	384	3	virtual	virtual	ADJ
fuelectenerg-1260	384	4	prototyping	prototyping	NOUN
fuelectenerg-1260	384	5	project	project	NOUN
fuelectenerg-1260	384	6	,	,	PUNCT
fuelectenerg-1260	384	7	this	this	PRON
fuelectenerg-1260	384	8	is	be	AUX
fuelectenerg-1260	384	9	a	a	DET
fuelectenerg-1260	384	10	huge	huge	ADJ
fuelectenerg-1260	384	11	task	task	NOUN
fuelectenerg-1260	384	12	that	that	PRON
fuelectenerg-1260	384	13	must	must	AUX
fuelectenerg-1260	384	14	be	be	AUX
fuelectenerg-1260	384	15	broken	break	VERB
fuelectenerg-1260	384	16	down	down	ADP
fuelectenerg-1260	384	17	into	into	ADP
fuelectenerg-1260	384	18	smaller	small	ADJ
fuelectenerg-1260	384	19	,	,	PUNCT
fuelectenerg-1260	384	20	more	more	ADV
fuelectenerg-1260	384	21	manageable	manageable	ADJ
fuelectenerg-1260	384	22	parts	part	NOUN
fuelectenerg-1260	384	23	.	.	PUNCT
fuelectenerg-1260	385	1	we	we	PRON
fuelectenerg-1260	385	2	do	do	VERB
fuelectenerg-1260	385	3	this	this	PRON
fuelectenerg-1260	385	4	by	by	ADP
fuelectenerg-1260	385	5	following	follow	VERB
fuelectenerg-1260	385	6	the	the	DET
fuelectenerg-1260	385	7	naturally	naturally	ADV
fuelectenerg-1260	385	8	given	give	VERB
fuelectenerg-1260	385	9	classification	classification	NOUN
fuelectenerg-1260	385	10	of	of	ADP
fuelectenerg-1260	385	11	actuators	actuator	NOUN
fuelectenerg-1260	385	12	and	and	CCONJ
fuelectenerg-1260	385	13	sensors	sensor	NOUN
fuelectenerg-1260	385	14	according	accord	VERB
fuelectenerg-1260	385	15	to	to	ADP
fuelectenerg-1260	385	16	their	their	PRON
fuelectenerg-1260	385	17	operational	operational	ADJ
fuelectenerg-1260	385	18	principles	principle	NOUN
fuelectenerg-1260	385	19	.	.	PUNCT
fuelectenerg-1260	386	1	however	however	ADV
fuelectenerg-1260	386	2	,	,	PUNCT
fuelectenerg-1260	386	3	we	we	PRON
fuelectenerg-1260	386	4	can	can	AUX
fuelectenerg-1260	386	5	not	not	PART
fuelectenerg-1260	386	6	isolate	isolate	VERB
fuelectenerg-1260	386	7	the	the	DET
fuelectenerg-1260	386	8	design	design	NOUN
fuelectenerg-1260	386	9	of	of	ADP
fuelectenerg-1260	386	10	each	each	DET
fuelectenerg-1260	386	11	class	class	NOUN
fuelectenerg-1260	386	12	of	of	ADP
fuelectenerg-1260	386	13	sensor	sensor	NOUN
fuelectenerg-1260	386	14	,	,	PUNCT
fuelectenerg-1260	386	15	because	because	SCONJ
fuelectenerg-1260	386	16	it	it	PRON
fuelectenerg-1260	386	17	would	would	AUX
fuelectenerg-1260	386	18	defy	defy	VERB
fuelectenerg-1260	386	19	the	the	DET
fuelectenerg-1260	386	20	overall	overall	ADJ
fuelectenerg-1260	386	21	purpose	purpose	NOUN
fuelectenerg-1260	386	22	of	of	ADP
fuelectenerg-1260	386	23	providing	provide	VERB
fuelectenerg-1260	386	24	a	a	DET
fuelectenerg-1260	386	25	design	design	NOUN
fuelectenerg-1260	386	26	tool	tool	NOUN
fuelectenerg-1260	386	27	that	that	PRON
fuelectenerg-1260	386	28	offers	offer	VERB
fuelectenerg-1260	386	29	flexibility	flexibility	NOUN
fuelectenerg-1260	386	30	and	and	CCONJ
fuelectenerg-1260	386	31	allows	allow	VERB
fuelectenerg-1260	386	32	for	for	ADP
fuelectenerg-1260	386	33	innovation	innovation	NOUN
fuelectenerg-1260	386	34	perhaps	perhaps	ADV
fuelectenerg-1260	386	35	across	across	ADP
fuelectenerg-1260	386	36	different	different	ADJ
fuelectenerg-1260	386	37	technologies	technology	NOUN
fuelectenerg-1260	386	38	.	.	PUNCT
fuelectenerg-1260	387	1	this	this	PRON
fuelectenerg-1260	387	2	has	have	AUX
fuelectenerg-1260	387	3	been	be	AUX
fuelectenerg-1260	387	4	exemplified	exemplify	VERB
fuelectenerg-1260	387	5	in	in	ADP
fuelectenerg-1260	387	6	the	the	DET
fuelectenerg-1260	387	7	previous	previous	ADJ
fuelectenerg-1260	387	8	sections	section	NOUN
fuelectenerg-1260	387	9	of	of	ADP
fuelectenerg-1260	387	10	this	this	DET
fuelectenerg-1260	387	11	paper	paper	NOUN
fuelectenerg-1260	387	12	.	.	PUNCT
fuelectenerg-1260	388	1	it	it	PRON
fuelectenerg-1260	388	2	is	be	AUX
fuelectenerg-1260	388	3	therefore	therefore	ADV
fuelectenerg-1260	388	4	that	that	SCONJ
fuelectenerg-1260	388	5	the	the	DET
fuelectenerg-1260	388	6	virtual	virtual	ADJ
fuelectenerg-1260	388	7	prototyping	prototyping	NOUN
fuelectenerg-1260	388	8	facility	facility	NOUN
fuelectenerg-1260	388	9	must	must	AUX
fuelectenerg-1260	388	10	be	be	AUX
fuelectenerg-1260	388	11	able	able	ADJ
fuelectenerg-1260	388	12	to	to	PART
fuelectenerg-1260	388	13	combine	combine	VERB
fuelectenerg-1260	388	14	different	different	ADJ
fuelectenerg-1260	388	15	technologies	technology	NOUN
fuelectenerg-1260	388	16	and	and	CCONJ
fuelectenerg-1260	388	17	at	at	ADP
fuelectenerg-1260	388	18	the	the	DET
fuelectenerg-1260	388	19	same	same	ADJ
fuelectenerg-1260	388	20	time	time	NOUN
fuelectenerg-1260	388	21	work	work	NOUN
fuelectenerg-1260	388	22	in	in	ADP
fuelectenerg-1260	388	23	concert	concert	NOUN
fuelectenerg-1260	388	24	with	with	ADP
fuelectenerg-1260	388	25	the	the	DET
fuelectenerg-1260	388	26	different	different	ADJ
fuelectenerg-1260	388	27	components	component	NOUN
fuelectenerg-1260	388	28	of	of	ADP
fuelectenerg-1260	388	29	the	the	DET
fuelectenerg-1260	388	30	mems	mem	NOUN
fuelectenerg-1260	388	31	to	to	PART
fuelectenerg-1260	388	32	be	be	AUX
fuelectenerg-1260	388	33	designed	design	VERB
fuelectenerg-1260	388	34	.	.	PUNCT
fuelectenerg-1260	389	1	magda	magda	NOUN
fuelectenerg-1260	389	2	is	be	AUX
fuelectenerg-1260	389	3	not	not	PART
fuelectenerg-1260	389	4	intended	intend	VERB
fuelectenerg-1260	389	5	for	for	ADP
fuelectenerg-1260	389	6	virtual	virtual	ADJ
fuelectenerg-1260	389	7	manufacturing	manufacturing	NOUN
fuelectenerg-1260	389	8	;	;	PUNCT
fuelectenerg-1260	389	9	this	this	PRON
fuelectenerg-1260	389	10	is	be	AUX
fuelectenerg-1260	389	11	a	a	DET
fuelectenerg-1260	389	12	different	different	ADJ
fuelectenerg-1260	389	13	niche	niche	NOUN
fuelectenerg-1260	389	14	altogether	altogether	ADV
fuelectenerg-1260	389	15	.	.	PUNCT
fuelectenerg-1260	390	1	an	an	DET
fuelectenerg-1260	390	2	exception	exception	NOUN
fuelectenerg-1260	390	3	to	to	ADP
fuelectenerg-1260	390	4	this	this	PRON
fuelectenerg-1260	390	5	is	be	AUX
fuelectenerg-1260	390	6	virtual	virtual	ADJ
fuelectenerg-1260	390	7	etching	etching	NOUN
fuelectenerg-1260	390	8	because	because	SCONJ
fuelectenerg-1260	390	9	the	the	DET
fuelectenerg-1260	390	10	different	different	ADJ
fuelectenerg-1260	390	11	types	type	NOUN
fuelectenerg-1260	390	12	of	of	ADP
fuelectenerg-1260	390	13	etching	etch	VERB
fuelectenerg-1260	390	14	affect	affect	VERB
fuelectenerg-1260	390	15	the	the	DET
fuelectenerg-1260	390	16	shape	shape	NOUN
fuelectenerg-1260	390	17	of	of	ADP
fuelectenerg-1260	390	18	material	material	NOUN
fuelectenerg-1260	390	19	removal	removal	NOUN
fuelectenerg-1260	390	20	and	and	CCONJ
fuelectenerg-1260	390	21	consequently	consequently	ADV
fuelectenerg-1260	390	22	the	the	DET
fuelectenerg-1260	390	23	shape	shape	NOUN
fuelectenerg-1260	390	24	of	of	ADP
fuelectenerg-1260	390	25	the	the	DET
fuelectenerg-1260	390	26	object	object	NOUN
fuelectenerg-1260	390	27	(	(	PUNCT
fuelectenerg-1260	390	28	straight	straight	ADJ
fuelectenerg-1260	390	29	or	or	CCONJ
fuelectenerg-1260	390	30	curved	curved	ADJ
fuelectenerg-1260	390	31	corners	corner	NOUN
fuelectenerg-1260	390	32	,	,	PUNCT
fuelectenerg-1260	390	33	edges	edge	NOUN
fuelectenerg-1260	390	34	and	and	CCONJ
fuelectenerg-1260	390	35	shapes	shape	NOUN
fuelectenerg-1260	390	36	)	)	PUNCT
fuelectenerg-1260	390	37	.	.	PUNCT
fuelectenerg-1260	391	1	for	for	ADP
fuelectenerg-1260	391	2	the	the	DET
fuelectenerg-1260	391	3	software	software	NOUN
fuelectenerg-1260	391	4	,	,	PUNCT
fuelectenerg-1260	391	5	development	development	NOUN
fuelectenerg-1260	391	6	matlab	matlab	PROPN
fuelectenerg-1260	391	7	tm	tm	PROPN
fuelectenerg-1260	391	8	and	and	CCONJ
fuelectenerg-1260	391	9	c	c	PROPN
fuelectenerg-1260	391	10	wereu	wereu	NOUN
fuelectenerg-1260	391	11	sed	se	VERB
fuelectenerg-1260	391	12	for	for	ADP
fuelectenerg-1260	391	13	the	the	DET
fuelectenerg-1260	391	14	physical	physical	ADJ
fuelectenerg-1260	391	15	shape	shape	NOUN
fuelectenerg-1260	391	16	design	design	NOUN
fuelectenerg-1260	391	17	drawing	drawing	NOUN
fuelectenerg-1260	391	18	board	board	NOUN
fuelectenerg-1260	391	19	and	and	CCONJ
fuelectenerg-1260	391	20	vrml	vrml	PROPN
fuelectenerg-1260	391	21	for	for	ADP
fuelectenerg-1260	391	22	the	the	DET
fuelectenerg-1260	391	23	visualizations	visualization	NOUN
fuelectenerg-1260	391	24	.	.	PUNCT
fuelectenerg-1260	392	1	the	the	DET
fuelectenerg-1260	392	2	benefit	benefit	NOUN
fuelectenerg-1260	392	3	of	of	ADP
fuelectenerg-1260	392	4	matlab	matlab	PROPN
fuelectenerg-1260	392	5	is	be	AUX
fuelectenerg-1260	392	6	that	that	SCONJ
fuelectenerg-1260	392	7	it	it	PRON
fuelectenerg-1260	392	8	can	can	AUX
fuelectenerg-1260	392	9	be	be	AUX
fuelectenerg-1260	392	10	used	use	VERB
fuelectenerg-1260	392	11	on	on	ADP
fuelectenerg-1260	392	12	windows	window	NOUN
fuelectenerg-1260	392	13	and	and	CCONJ
fuelectenerg-1260	392	14	unix	unix	PROPN
fuelectenerg-1260	392	15	os	os	NOUN
fuelectenerg-1260	392	16	.	.	PUNCT
fuelectenerg-1260	393	1	it	it	PRON
fuelectenerg-1260	393	2	is	be	AUX
fuelectenerg-1260	393	3	widely	widely	ADV
fuelectenerg-1260	393	4	available	available	ADJ
fuelectenerg-1260	393	5	,	,	PUNCT
fuelectenerg-1260	393	6	affordable	affordable	ADJ
fuelectenerg-1260	393	7	,	,	PUNCT
fuelectenerg-1260	393	8	and	and	CCONJ
fuelectenerg-1260	393	9	it	it	PRON
fuelectenerg-1260	393	10	has	have	VERB
fuelectenerg-1260	393	11	good	good	ADJ
fuelectenerg-1260	393	12	graphics	graphic	NOUN
fuelectenerg-1260	393	13	facilities	facility	NOUN
fuelectenerg-1260	393	14	.	.	PUNCT
fuelectenerg-1260	394	1	for	for	ADP
fuelectenerg-1260	394	2	the	the	DET
fuelectenerg-1260	394	3	control	control	NOUN
fuelectenerg-1260	394	4	and	and	CCONJ
fuelectenerg-1260	394	5	interaction	interaction	NOUN
fuelectenerg-1260	394	6	of	of	ADP
fuelectenerg-1260	394	7	the	the	DET
fuelectenerg-1260	394	8	mems	mem	NOUN
fuelectenerg-1260	394	9	(	(	PUNCT
fuelectenerg-1260	394	10	systems	system	NOUN
fuelectenerg-1260	394	11	modelling	modelling	NOUN
fuelectenerg-1260	394	12	)	)	PUNCT
fuelectenerg-1260	394	13	simulink	simulink	NOUN
fuelectenerg-1260	394	14	is	be	AUX
fuelectenerg-1260	394	15	suitable	suitable	ADJ
fuelectenerg-1260	394	16	.	.	PUNCT
fuelectenerg-1260	395	1	an	an	DET
fuelectenerg-1260	395	2	additional	additional	ADJ
fuelectenerg-1260	395	3	advantage	advantage	NOUN
fuelectenerg-1260	395	4	for	for	ADP
fuelectenerg-1260	395	5	using	use	VERB
fuelectenerg-1260	395	6	matlab	matlab	PROPN
fuelectenerg-1260	395	7	is	be	AUX
fuelectenerg-1260	395	8	that	that	SCONJ
fuelectenerg-1260	395	9	mems	mems	PROPN
fuelectenerg-1260	395	10	design	design	NOUN
fuelectenerg-1260	395	11	engineers	engineer	NOUN
fuelectenerg-1260	395	12	can	can	AUX
fuelectenerg-1260	395	13	link	link	VERB
fuelectenerg-1260	395	14	the	the	DET
fuelectenerg-1260	395	15	virtual	virtual	ADJ
fuelectenerg-1260	395	16	prototyping	prototyping	NOUN
fuelectenerg-1260	395	17	with	with	ADP
fuelectenerg-1260	395	18	their	their	PRON
fuelectenerg-1260	395	19	earlier	early	ADJ
fuelectenerg-1260	395	20	calculations	calculation	NOUN
fuelectenerg-1260	395	21	and	and	CCONJ
fuelectenerg-1260	395	22	results	result	NOUN
fuelectenerg-1260	395	23	if	if	SCONJ
fuelectenerg-1260	395	24	they	they	PRON
fuelectenerg-1260	395	25	were	be	AUX
fuelectenerg-1260	395	26	done	do	VERB
fuelectenerg-1260	395	27	in	in	ADP
fuelectenerg-1260	395	28	matlab	matlab	PROPN
fuelectenerg-1260	395	29	.	.	PUNCT
fuelectenerg-1260	396	1	however	however	ADV
fuelectenerg-1260	396	2	,	,	PUNCT
fuelectenerg-1260	396	3	one	one	NUM
fuelectenerg-1260	396	4	severe	severe	ADJ
fuelectenerg-1260	396	5	problem	problem	NOUN
fuelectenerg-1260	396	6	with	with	ADP
fuelectenerg-1260	396	7	matlab	matlab	PROPN
fuelectenerg-1260	396	8	is	be	AUX
fuelectenerg-1260	396	9	that	that	SCONJ
fuelectenerg-1260	396	10	it	it	PRON
fuelectenerg-1260	396	11	is	be	AUX
fuelectenerg-1260	396	12	not	not	PART
fuelectenerg-1260	396	13	a	a	DET
fuelectenerg-1260	396	14	stable	stable	ADJ
fuelectenerg-1260	396	15	fig	fig	NOUN
fuelectenerg-1260	396	16	.	.	PUNCT
fuelectenerg-1260	397	1	1	1	NUM
fuelectenerg-1260	397	2	magda	magda	PROPN
fuelectenerg-1260	397	3	organizational	organizational	ADJ
fuelectenerg-1260	397	4	diagram	diagram	NOUN
fuelectenerg-1260	397	5	.	.	PUNCT
fuelectenerg-1260	398	1	24	24	NUM
fuelectenerg-1260	398	2	r.	r.	PROPN
fuelectenerg-1260	398	3	sitte	sitte	PROPN
fuelectenerg-1260	398	4	software	software	PROPN
fuelectenerg-1260	398	5	.	.	PUNCT
fuelectenerg-1260	399	1	as	as	SCONJ
fuelectenerg-1260	399	2	we	we	PRON
fuelectenerg-1260	399	3	have	have	AUX
fuelectenerg-1260	399	4	regrettably	regrettably	ADV
fuelectenerg-1260	399	5	experienced	experience	VERB
fuelectenerg-1260	399	6	,	,	PUNCT
fuelectenerg-1260	399	7	it	it	PRON
fuelectenerg-1260	399	8	suffers	suffer	VERB
fuelectenerg-1260	399	9	from	from	ADP
fuelectenerg-1260	399	10	version	version	NOUN
fuelectenerg-1260	399	11	changes	change	NOUN
fuelectenerg-1260	399	12	and	and	CCONJ
fuelectenerg-1260	399	13	upgrades	upgrade	NOUN
fuelectenerg-1260	399	14	that	that	PRON
fuelectenerg-1260	399	15	are	be	AUX
fuelectenerg-1260	399	16	not	not	PART
fuelectenerg-1260	399	17	backward	backward	ADV
fuelectenerg-1260	399	18	compatible	compatible	ADJ
fuelectenerg-1260	399	19	,	,	PUNCT
fuelectenerg-1260	399	20	sometimes	sometimes	ADV
fuelectenerg-1260	399	21	rendering	render	VERB
fuelectenerg-1260	399	22	existing	exist	VERB
fuelectenerg-1260	399	23	software	software	NOUN
fuelectenerg-1260	399	24	useless	useless	ADJ
fuelectenerg-1260	399	25	.	.	PUNCT
fuelectenerg-1260	400	1	6.1	6.1	NUM
fuelectenerg-1260	400	2	.	.	PUNCT
fuelectenerg-1260	400	3	visualizations	visualization	NOUN
fuelectenerg-1260	400	4	and	and	CCONJ
fuelectenerg-1260	400	5	animations	animation	NOUN
fuelectenerg-1260	400	6	in	in	ADP
fuelectenerg-1260	400	7	our	our	PRON
fuelectenerg-1260	400	8	magda	magda	PROPN
fuelectenerg-1260	400	9	vr	vr	PROPN
fuelectenerg-1260	400	10	visualizations	visualization	NOUN
fuelectenerg-1260	400	11	,	,	PUNCT
fuelectenerg-1260	400	12	we	we	PRON
fuelectenerg-1260	400	13	use	use	VERB
fuelectenerg-1260	400	14	physically	physically	ADV
fuelectenerg-1260	400	15	based	base	VERB
fuelectenerg-1260	400	16	rendering	rendering	NOUN
fuelectenerg-1260	400	17	.	.	PUNCT
fuelectenerg-1260	401	1	most	most	ADJ
fuelectenerg-1260	401	2	of	of	ADP
fuelectenerg-1260	401	3	the	the	DET
fuelectenerg-1260	401	4	code	code	NOUN
fuelectenerg-1260	401	5	is	be	AUX
fuelectenerg-1260	401	6	written	write	VERB
fuelectenerg-1260	401	7	in	in	ADP
fuelectenerg-1260	401	8	vrml	vrml	PROPN
fuelectenerg-1260	401	9	.	.	PUNCT
fuelectenerg-1260	402	1	we	we	PRON
fuelectenerg-1260	402	2	also	also	ADV
fuelectenerg-1260	402	3	use	use	VERB
fuelectenerg-1260	402	4	transparency	transparency	NOUN
fuelectenerg-1260	402	5	for	for	ADP
fuelectenerg-1260	402	6	flexibility	flexibility	NOUN
fuelectenerg-1260	402	7	and	and	CCONJ
fuelectenerg-1260	402	8	easier	easy	ADJ
fuelectenerg-1260	402	9	understanding	understand	VERB
fuelectenerg-1260	402	10	the	the	DET
fuelectenerg-1260	402	11	devices	device	NOUN
fuelectenerg-1260	402	12	in	in	ADP
fuelectenerg-1260	402	13	3d	3d	PROPN
fuelectenerg-1260	402	14	visualizations	visualization	NOUN
fuelectenerg-1260	402	15	.	.	PUNCT
fuelectenerg-1260	403	1	visualizations	visualization	NOUN
fuelectenerg-1260	403	2	can	can	AUX
fuelectenerg-1260	403	3	be	be	AUX
fuelectenerg-1260	403	4	rotated	rotate	VERB
fuelectenerg-1260	403	5	for	for	ADP
fuelectenerg-1260	403	6	easier	easy	ADJ
fuelectenerg-1260	403	7	inspection	inspection	NOUN
fuelectenerg-1260	403	8	from	from	ADP
fuelectenerg-1260	403	9	different	different	ADJ
fuelectenerg-1260	403	10	aspects	aspect	NOUN
fuelectenerg-1260	403	11	.	.	PUNCT
fuelectenerg-1260	404	1	images	image	NOUN
fuelectenerg-1260	404	2	on	on	ADP
fuelectenerg-1260	404	3	screens	screen	NOUN
fuelectenerg-1260	404	4	are	be	AUX
fuelectenerg-1260	404	5	two	two	NUM
fuelectenerg-1260	404	6	-	-	PUNCT
fuelectenerg-1260	404	7	dimensional	dimensional	ADJ
fuelectenerg-1260	404	8	arrays	array	NOUN
fuelectenerg-1260	404	9	of	of	ADP
fuelectenerg-1260	404	10	pixels	pixel	NOUN
fuelectenerg-1260	404	11	,	,	PUNCT
fuelectenerg-1260	404	12	sometimes	sometimes	ADV
fuelectenerg-1260	404	13	representing	represent	VERB
fuelectenerg-1260	404	14	3d	3d	NOUN
fuelectenerg-1260	404	15	and	and	CCONJ
fuelectenerg-1260	404	16	moving	move	VERB
fuelectenerg-1260	404	17	structures	structure	NOUN
fuelectenerg-1260	404	18	.	.	PUNCT
fuelectenerg-1260	405	1	representing	represent	VERB
fuelectenerg-1260	405	2	specific	specific	ADJ
fuelectenerg-1260	405	3	movements	movement	NOUN
fuelectenerg-1260	405	4	by	by	ADP
fuelectenerg-1260	405	5	showing	show	VERB
fuelectenerg-1260	405	6	series	series	NOUN
fuelectenerg-1260	405	7	of	of	ADP
fuelectenerg-1260	405	8	lights	light	NOUN
fuelectenerg-1260	405	9	(	(	PUNCT
fuelectenerg-1260	405	10	pixels	pixel	NOUN
fuelectenerg-1260	405	11	)	)	PUNCT
fuelectenerg-1260	405	12	some	some	DET
fuelectenerg-1260	405	13	flashing	flash	VERB
fuelectenerg-1260	405	14	alternating	alternate	VERB
fuelectenerg-1260	405	15	with	with	ADP
fuelectenerg-1260	405	16	each	each	DET
fuelectenerg-1260	405	17	other	other	ADJ
fuelectenerg-1260	405	18	to	to	PART
fuelectenerg-1260	405	19	make	make	VERB
fuelectenerg-1260	405	20	the	the	DET
fuelectenerg-1260	405	21	whole	whole	ADJ
fuelectenerg-1260	405	22	series	series	NOUN
fuelectenerg-1260	405	23	appear	appear	VERB
fuelectenerg-1260	405	24	moving	move	VERB
fuelectenerg-1260	405	25	in	in	ADP
fuelectenerg-1260	405	26	a	a	DET
fuelectenerg-1260	405	27	specific	specific	ADJ
fuelectenerg-1260	405	28	direction	direction	NOUN
fuelectenerg-1260	405	29	and	and	CCONJ
fuelectenerg-1260	405	30	changing	change	VERB
fuelectenerg-1260	405	31	,	,	PUNCT
fuelectenerg-1260	405	32	is	be	AUX
fuelectenerg-1260	405	33	not	not	PART
fuelectenerg-1260	405	34	trivial	trivial	ADJ
fuelectenerg-1260	405	35	,	,	PUNCT
fuelectenerg-1260	405	36	because	because	SCONJ
fuelectenerg-1260	405	37	its	its	PRON
fuelectenerg-1260	405	38	outcome	outcome	NOUN
fuelectenerg-1260	405	39	depend	depend	VERB
fuelectenerg-1260	405	40	a	a	DET
fuelectenerg-1260	405	41	range	range	NOUN
fuelectenerg-1260	405	42	of	of	ADP
fuelectenerg-1260	405	43	“	"	PUNCT
fuelectenerg-1260	405	44	by	by	ADP
fuelectenerg-1260	405	45	-	-	PUNCT
fuelectenerg-1260	405	46	effects	effect	NOUN
fuelectenerg-1260	405	47	”	"	PUNCT
fuelectenerg-1260	405	48	that	that	PRON
fuelectenerg-1260	405	49	affect	affect	VERB
fuelectenerg-1260	405	50	the	the	DET
fuelectenerg-1260	405	51	visual	visual	ADJ
fuelectenerg-1260	405	52	perception	perception	NOUN
fuelectenerg-1260	405	53	in	in	ADP
fuelectenerg-1260	405	54	either	either	CCONJ
fuelectenerg-1260	405	55	good	good	ADJ
fuelectenerg-1260	405	56	or	or	CCONJ
fuelectenerg-1260	405	57	bad	bad	ADJ
fuelectenerg-1260	405	58	ways	way	NOUN
fuelectenerg-1260	405	59	.	.	PUNCT
fuelectenerg-1260	406	1	a	a	DET
fuelectenerg-1260	406	2	well	well	ADV
fuelectenerg-1260	406	3	known	know	VERB
fuelectenerg-1260	406	4	example	example	NOUN
fuelectenerg-1260	406	5	is	be	AUX
fuelectenerg-1260	406	6	wheels	wheel	NOUN
fuelectenerg-1260	406	7	(	(	PUNCT
fuelectenerg-1260	406	8	or	or	CCONJ
fuelectenerg-1260	406	9	gears	gear	NOUN
fuelectenerg-1260	406	10	)	)	PUNCT
fuelectenerg-1260	406	11	rotating	rotate	VERB
fuelectenerg-1260	406	12	“	"	PUNCT
fuelectenerg-1260	406	13	backwards	backwards	ADV
fuelectenerg-1260	406	14	”	"	PUNCT
fuelectenerg-1260	406	15	while	while	SCONJ
fuelectenerg-1260	406	16	the	the	DET
fuelectenerg-1260	406	17	object	object	NOUN
fuelectenerg-1260	406	18	where	where	SCONJ
fuelectenerg-1260	406	19	they	they	PRON
fuelectenerg-1260	406	20	are	be	AUX
fuelectenerg-1260	406	21	attached	attach	VERB
fuelectenerg-1260	406	22	moves	move	NOUN
fuelectenerg-1260	406	23	forwards	forward	NOUN
fuelectenerg-1260	406	24	.	.	PUNCT
fuelectenerg-1260	407	1	one	one	NUM
fuelectenerg-1260	407	2	of	of	ADP
fuelectenerg-1260	407	3	the	the	DET
fuelectenerg-1260	407	4	main	main	ADJ
fuelectenerg-1260	407	5	purposes	purpose	NOUN
fuelectenerg-1260	407	6	of	of	ADP
fuelectenerg-1260	407	7	magda	magda	PROPN
fuelectenerg-1260	407	8	is	be	AUX
fuelectenerg-1260	407	9	to	to	PART
fuelectenerg-1260	407	10	show	show	VERB
fuelectenerg-1260	407	11	animations	animation	NOUN
fuelectenerg-1260	407	12	of	of	ADP
fuelectenerg-1260	407	13	a	a	DET
fuelectenerg-1260	407	14	functioning	function	VERB
fuelectenerg-1260	407	15	mems	mem	NOUN
fuelectenerg-1260	407	16	in	in	ADP
fuelectenerg-1260	407	17	scaled	scale	VERB
fuelectenerg-1260	407	18	observable	observable	ADJ
fuelectenerg-1260	407	19	“	"	PUNCT
fuelectenerg-1260	407	20	real	real	ADJ
fuelectenerg-1260	407	21	time	time	NOUN
fuelectenerg-1260	407	22	”	"	PUNCT
fuelectenerg-1260	407	23	.	.	PUNCT
fuelectenerg-1260	408	1	this	this	PRON
fuelectenerg-1260	408	2	can	can	AUX
fuelectenerg-1260	408	3	include	include	VERB
fuelectenerg-1260	408	4	components	component	NOUN
fuelectenerg-1260	408	5	simultaneously	simultaneously	ADV
fuelectenerg-1260	408	6	moving	move	VERB
fuelectenerg-1260	408	7	at	at	ADP
fuelectenerg-1260	408	8	cycle	cycle	NOUN
fuelectenerg-1260	408	9	times	time	NOUN
fuelectenerg-1260	408	10	that	that	PRON
fuelectenerg-1260	408	11	can	can	AUX
fuelectenerg-1260	408	12	differ	differ	VERB
fuelectenerg-1260	408	13	in	in	ADP
fuelectenerg-1260	408	14	orders	order	NOUN
fuelectenerg-1260	408	15	of	of	ADP
fuelectenerg-1260	408	16	magnitude	magnitude	NOUN
fuelectenerg-1260	408	17	,	,	PUNCT
fuelectenerg-1260	408	18	for	for	ADP
fuelectenerg-1260	408	19	example	example	NOUN
fuelectenerg-1260	408	20	,	,	PUNCT
fuelectenerg-1260	408	21	a	a	DET
fuelectenerg-1260	408	22	gear	gear	NOUN
fuelectenerg-1260	408	23	rotating	rotating	NOUN
fuelectenerg-1260	408	24	,	,	PUNCT
fuelectenerg-1260	408	25	a	a	DET
fuelectenerg-1260	408	26	cantilever	cantilever	NOUN
fuelectenerg-1260	408	27	flipping	flipping	NOUN
fuelectenerg-1260	408	28	and	and	CCONJ
fuelectenerg-1260	408	29	a	a	DET
fuelectenerg-1260	408	30	membrane	membrane	NOUN
fuelectenerg-1260	408	31	bending	bending	NOUN
fuelectenerg-1260	408	32	.	.	PUNCT
fuelectenerg-1260	409	1	therefore	therefore	ADV
fuelectenerg-1260	409	2	,	,	PUNCT
fuelectenerg-1260	409	3	animations	animation	NOUN
fuelectenerg-1260	409	4	can	can	AUX
fuelectenerg-1260	409	5	not	not	PART
fuelectenerg-1260	409	6	be	be	AUX
fuelectenerg-1260	409	7	a	a	DET
fuelectenerg-1260	409	8	simple	simple	ADJ
fuelectenerg-1260	409	9	a	a	DET
fuelectenerg-1260	409	10	zoom	zoom	NOUN
fuelectenerg-1260	409	11	in	in	ADP
fuelectenerg-1260	409	12	time	time	NOUN
fuelectenerg-1260	409	13	,	,	PUNCT
fuelectenerg-1260	409	14	because	because	SCONJ
fuelectenerg-1260	409	15	it	it	PRON
fuelectenerg-1260	409	16	would	would	AUX
fuelectenerg-1260	409	17	cause	cause	VERB
fuelectenerg-1260	409	18	too	too	ADV
fuelectenerg-1260	409	19	much	much	ADJ
fuelectenerg-1260	409	20	distortion	distortion	NOUN
fuelectenerg-1260	409	21	between	between	ADP
fuelectenerg-1260	409	22	moving	move	VERB
fuelectenerg-1260	409	23	parts	part	NOUN
fuelectenerg-1260	409	24	with	with	ADP
fuelectenerg-1260	409	25	different	different	ADJ
fuelectenerg-1260	409	26	motion	motion	NOUN
fuelectenerg-1260	409	27	rhythms	rhythm	NOUN
fuelectenerg-1260	409	28	.	.	PUNCT
fuelectenerg-1260	410	1	while	while	SCONJ
fuelectenerg-1260	410	2	observing	observe	VERB
fuelectenerg-1260	410	3	the	the	DET
fuelectenerg-1260	410	4	movement	movement	NOUN
fuelectenerg-1260	410	5	of	of	ADP
fuelectenerg-1260	410	6	one	one	NUM
fuelectenerg-1260	410	7	component	component	NOUN
fuelectenerg-1260	410	8	in	in	ADP
fuelectenerg-1260	410	9	slow	slow	ADJ
fuelectenerg-1260	410	10	motion	motion	NOUN
fuelectenerg-1260	410	11	,	,	PUNCT
fuelectenerg-1260	410	12	another	another	DET
fuelectenerg-1260	410	13	one	one	PRON
fuelectenerg-1260	410	14	could	could	AUX
fuelectenerg-1260	410	15	come	come	VERB
fuelectenerg-1260	410	16	to	to	ADP
fuelectenerg-1260	410	17	a	a	DET
fuelectenerg-1260	410	18	stand	stand	NOUN
fuelectenerg-1260	410	19	still	still	ADV
fuelectenerg-1260	410	20	.	.	PUNCT
fuelectenerg-1260	411	1	we	we	PRON
fuelectenerg-1260	411	2	have	have	VERB
fuelectenerg-1260	411	3	to	to	PART
fuelectenerg-1260	411	4	be	be	AUX
fuelectenerg-1260	411	5	aware	aware	ADJ
fuelectenerg-1260	411	6	that	that	SCONJ
fuelectenerg-1260	411	7	we	we	PRON
fuelectenerg-1260	411	8	are	be	AUX
fuelectenerg-1260	411	9	performing	perform	VERB
fuelectenerg-1260	411	10	animated	animate	VERB
fuelectenerg-1260	411	11	visualizations	visualization	NOUN
fuelectenerg-1260	411	12	of	of	ADP
fuelectenerg-1260	411	13	simulations	simulation	NOUN
fuelectenerg-1260	411	14	that	that	PRON
fuelectenerg-1260	411	15	must	must	AUX
fuelectenerg-1260	411	16	strictly	strictly	ADV
fuelectenerg-1260	411	17	map	map	VERB
fuelectenerg-1260	411	18	to	to	ADP
fuelectenerg-1260	411	19	their	their	PRON
fuelectenerg-1260	411	20	object	object	NOUN
fuelectenerg-1260	411	21	’s	’s	PART
fuelectenerg-1260	411	22	physical	physical	ADJ
fuelectenerg-1260	411	23	behaviour	behaviour	NOUN
fuelectenerg-1260	411	24	without	without	ADP
fuelectenerg-1260	411	25	ever	ever	ADV
fuelectenerg-1260	411	26	degrading	degrade	VERB
fuelectenerg-1260	411	27	to	to	ADP
fuelectenerg-1260	411	28	a	a	DET
fuelectenerg-1260	411	29	cartoon	cartoon	NOUN
fuelectenerg-1260	411	30	.	.	PUNCT
fuelectenerg-1260	412	1	we	we	PRON
fuelectenerg-1260	412	2	have	have	AUX
fuelectenerg-1260	412	3	addressed	address	VERB
fuelectenerg-1260	412	4	this	this	DET
fuelectenerg-1260	412	5	problem	problem	NOUN
fuelectenerg-1260	412	6	by	by	ADP
fuelectenerg-1260	412	7	simulated	simulate	VERB
fuelectenerg-1260	412	8	stroboscopic	stroboscopic	ADJ
fuelectenerg-1260	412	9	illumination	illumination	NOUN
fuelectenerg-1260	412	10	with	with	ADP
fuelectenerg-1260	412	11	flexible	flexible	ADJ
fuelectenerg-1260	412	12	fine	fine	ADJ
fuelectenerg-1260	412	13	tuning	tune	VERB
fuelectenerg-1260	412	14	its	its	PRON
fuelectenerg-1260	412	15	two	two	NUM
fuelectenerg-1260	412	16	virtual	virtual	ADJ
fuelectenerg-1260	412	17	stroboscopic	stroboscopic	NOUN
fuelectenerg-1260	412	18	flash	flash	NOUN
fuelectenerg-1260	412	19	parameters	parameter	NOUN
fuelectenerg-1260	412	20	:	:	PUNCT
fuelectenerg-1260	412	21	duration	duration	NOUN
fuelectenerg-1260	412	22	and	and	CCONJ
fuelectenerg-1260	412	23	interval	interval	NOUN
fuelectenerg-1260	412	24	.	.	PUNCT
fuelectenerg-1260	413	1	this	this	PRON
fuelectenerg-1260	413	2	is	be	AUX
fuelectenerg-1260	413	3	necessary	necessary	ADJ
fuelectenerg-1260	413	4	for	for	ADP
fuelectenerg-1260	413	5	overcoming	overcome	VERB
fuelectenerg-1260	413	6	results	result	NOUN
fuelectenerg-1260	413	7	of	of	ADP
fuelectenerg-1260	413	8	specific	specific	ADJ
fuelectenerg-1260	413	9	undesirable	undesirable	ADJ
fuelectenerg-1260	413	10	visual	visual	ADJ
fuelectenerg-1260	413	11	side	side	NOUN
fuelectenerg-1260	413	12	effects	effect	NOUN
fuelectenerg-1260	413	13	(	(	PUNCT
fuelectenerg-1260	413	14	jumpy	jumpy	ADJ
fuelectenerg-1260	413	15	or	or	CCONJ
fuelectenerg-1260	413	16	flickering	flickering	NOUN
fuelectenerg-1260	413	17	images	image	NOUN
fuelectenerg-1260	413	18	)	)	PUNCT
fuelectenerg-1260	413	19	and	and	CCONJ
fuelectenerg-1260	413	20	hardware	hardware	NOUN
fuelectenerg-1260	413	21	influences	influence	NOUN
fuelectenerg-1260	413	22	such	such	ADJ
fuelectenerg-1260	413	23	as	as	ADP
fuelectenerg-1260	413	24	pixel	pixel	PROPN
fuelectenerg-1260	413	25	size	size	NOUN
fuelectenerg-1260	413	26	and	and	CCONJ
fuelectenerg-1260	413	27	computing	compute	VERB
fuelectenerg-1260	413	28	latency	latency	NOUN
fuelectenerg-1260	413	29	effects	effect	NOUN
fuelectenerg-1260	413	30	[	[	X
fuelectenerg-1260	413	31	73	73	NUM
fuelectenerg-1260	413	32	,	,	PUNCT
fuelectenerg-1260	413	33	74	74	NUM
fuelectenerg-1260	413	34	]	]	PUNCT
fuelectenerg-1260	413	35	and	and	CCONJ
fuelectenerg-1260	413	36	to	to	PART
fuelectenerg-1260	413	37	provide	provide	VERB
fuelectenerg-1260	413	38	a	a	DET
fuelectenerg-1260	413	39	smooth	smooth	ADJ
fuelectenerg-1260	413	40	observable	observable	ADJ
fuelectenerg-1260	413	41	animation	animation	NOUN
fuelectenerg-1260	413	42	.	.	PUNCT
fuelectenerg-1260	414	1	if	if	SCONJ
fuelectenerg-1260	414	2	,	,	PUNCT
fuelectenerg-1260	414	3	for	for	ADP
fuelectenerg-1260	414	4	example	example	NOUN
fuelectenerg-1260	414	5	,	,	PUNCT
fuelectenerg-1260	414	6	in	in	ADP
fuelectenerg-1260	414	7	a	a	DET
fuelectenerg-1260	414	8	visual	visual	ADJ
fuelectenerg-1260	414	9	experiment	experiment	NOUN
fuelectenerg-1260	414	10	the	the	DET
fuelectenerg-1260	414	11	thickness	thickness	NOUN
fuelectenerg-1260	414	12	of	of	ADP
fuelectenerg-1260	414	13	a	a	DET
fuelectenerg-1260	414	14	micropump	micropump	NOUN
fuelectenerg-1260	414	15	membrane	membrane	NOUN
fuelectenerg-1260	414	16	as	as	SCONJ
fuelectenerg-1260	414	17	shown	show	VERB
fuelectenerg-1260	414	18	below	below	ADV
fuelectenerg-1260	414	19	in	in	ADP
fuelectenerg-1260	414	20	figure	figure	NOUN
fuelectenerg-1260	414	21	2	2	NUM
fuelectenerg-1260	414	22	is	be	AUX
fuelectenerg-1260	414	23	changed	change	VERB
fuelectenerg-1260	414	24	,	,	PUNCT
fuelectenerg-1260	414	25	the	the	DET
fuelectenerg-1260	414	26	two	two	NUM
fuelectenerg-1260	414	27	stroboscopic	stroboscopic	ADJ
fuelectenerg-1260	414	28	parameters	parameter	NOUN
fuelectenerg-1260	414	29	can	can	AUX
fuelectenerg-1260	414	30	be	be	AUX
fuelectenerg-1260	414	31	reset	reset	VERB
fuelectenerg-1260	414	32	by	by	ADP
fuelectenerg-1260	414	33	moving	move	VERB
fuelectenerg-1260	414	34	a	a	DET
fuelectenerg-1260	414	35	virtual	virtual	ADJ
fuelectenerg-1260	414	36	slider	slider	NOUN
fuelectenerg-1260	414	37	on	on	ADP
fuelectenerg-1260	414	38	the	the	DET
fuelectenerg-1260	414	39	screen	screen	NOUN
fuelectenerg-1260	414	40	,	,	PUNCT
fuelectenerg-1260	414	41	to	to	PART
fuelectenerg-1260	414	42	bring	bring	VERB
fuelectenerg-1260	414	43	the	the	DET
fuelectenerg-1260	414	44	new	new	ADJ
fuelectenerg-1260	414	45	conditions	condition	NOUN
fuelectenerg-1260	414	46	again	again	ADV
fuelectenerg-1260	414	47	into	into	ADP
fuelectenerg-1260	414	48	a	a	DET
fuelectenerg-1260	414	49	smooth	smooth	ADJ
fuelectenerg-1260	414	50	,	,	PUNCT
fuelectenerg-1260	414	51	non	non	ADJ
fuelectenerg-1260	414	52	flickering	flicker	VERB
fuelectenerg-1260	414	53	animation	animation	NOUN
fuelectenerg-1260	414	54	.	.	PUNCT
fuelectenerg-1260	415	1	this	this	PRON
fuelectenerg-1260	415	2	makes	make	VERB
fuelectenerg-1260	415	3	magda	magda	PROPN
fuelectenerg-1260	415	4	different	different	ADJ
fuelectenerg-1260	415	5	from	from	ADP
fuelectenerg-1260	415	6	other	other	ADJ
fuelectenerg-1260	415	7	simulators	simulator	NOUN
fuelectenerg-1260	415	8	.	.	PUNCT
fuelectenerg-1260	416	1	fig	fig	NOUN
fuelectenerg-1260	416	2	.	.	PUNCT
fuelectenerg-1260	417	1	2	2	NUM
fuelectenerg-1260	417	2	interactivevr	interactivevr	PROPN
fuelectenerg-1260	417	3	environment	environment	NOUN
fuelectenerg-1260	417	4	showing	show	VERB
fuelectenerg-1260	417	5	a	a	DET
fuelectenerg-1260	417	6	micropump	micropump	NOUN
fuelectenerg-1260	417	7	with	with	ADP
fuelectenerg-1260	417	8	flexing	flex	VERB
fuelectenerg-1260	417	9	membrane	membrane	NOUN
fuelectenerg-1260	417	10	,	,	PUNCT
fuelectenerg-1260	417	11	flow	flow	NOUN
fuelectenerg-1260	417	12	and	and	CCONJ
fuelectenerg-1260	417	13	user	user	NOUN
fuelectenerg-1260	417	14	controls	control	NOUN
fuelectenerg-1260	417	15	[	[	X
fuelectenerg-1260	417	16	73	73	NUM
fuelectenerg-1260	417	17	]	]	PUNCT
fuelectenerg-1260	417	18	.	.	PUNCT
fuelectenerg-1260	418	1	mems	mem	NOUN
fuelectenerg-1260	418	2	design	design	NOUN
fuelectenerg-1260	418	3	simplification	simplification	NOUN
fuelectenerg-1260	418	4	with	with	ADP
fuelectenerg-1260	418	5	virtual	virtual	ADJ
fuelectenerg-1260	418	6	prototyping	prototyping	NOUN
fuelectenerg-1260	418	7	25	25	NUM
fuelectenerg-1260	418	8	in	in	ADP
fuelectenerg-1260	418	9	what	what	PRON
fuelectenerg-1260	418	10	follows	follow	VERB
fuelectenerg-1260	418	11	,	,	PUNCT
fuelectenerg-1260	418	12	some	some	PRON
fuelectenerg-1260	418	13	of	of	ADP
fuelectenerg-1260	418	14	magda	magda	PROPN
fuelectenerg-1260	418	15	’s	’s	PART
fuelectenerg-1260	418	16	research	research	NOUN
fuelectenerg-1260	418	17	results	result	NOUN
fuelectenerg-1260	418	18	are	be	AUX
fuelectenerg-1260	418	19	briefly	briefly	ADV
fuelectenerg-1260	418	20	presented	present	VERB
fuelectenerg-1260	418	21	and	and	CCONJ
fuelectenerg-1260	418	22	what	what	PRON
fuelectenerg-1260	418	23	difficulties	difficulty	NOUN
fuelectenerg-1260	418	24	they	they	PRON
fuelectenerg-1260	418	25	are	be	AUX
fuelectenerg-1260	418	26	overcoming	overcome	VERB
fuelectenerg-1260	418	27	.	.	PUNCT
fuelectenerg-1260	419	1	for	for	ADP
fuelectenerg-1260	419	2	an	an	DET
fuelectenerg-1260	419	3	interactive	interactive	ADJ
fuelectenerg-1260	419	4	system	system	NOUN
fuelectenerg-1260	419	5	,	,	PUNCT
fuelectenerg-1260	419	6	fast	fast	ADJ
fuelectenerg-1260	419	7	response	response	NOUN
fuelectenerg-1260	419	8	is	be	AUX
fuelectenerg-1260	419	9	paramount	paramount	ADJ
fuelectenerg-1260	419	10	[	[	X
fuelectenerg-1260	419	11	71	71	NUM
fuelectenerg-1260	419	12	]	]	PUNCT
fuelectenerg-1260	419	13	.	.	PUNCT
fuelectenerg-1260	420	1	much	much	ADJ
fuelectenerg-1260	420	2	of	of	ADP
fuelectenerg-1260	420	3	mems	mem	NOUN
fuelectenerg-1260	420	4	physical	physical	ADJ
fuelectenerg-1260	420	5	modelling	modelling	NOUN
fuelectenerg-1260	420	6	is	be	AUX
fuelectenerg-1260	420	7	done	do	VERB
fuelectenerg-1260	420	8	with	with	ADP
fuelectenerg-1260	420	9	finite	finite	ADJ
fuelectenerg-1260	420	10	elements	element	NOUN
fuelectenerg-1260	420	11	.	.	PUNCT
fuelectenerg-1260	421	1	despite	despite	SCONJ
fuelectenerg-1260	421	2	substantially	substantially	ADV
fuelectenerg-1260	421	3	increasing	increase	VERB
fuelectenerg-1260	421	4	computing	compute	VERB
fuelectenerg-1260	421	5	power	power	NOUN
fuelectenerg-1260	421	6	,	,	PUNCT
fuelectenerg-1260	421	7	they	they	PRON
fuelectenerg-1260	421	8	are	be	AUX
fuelectenerg-1260	421	9	still	still	ADV
fuelectenerg-1260	421	10	too	too	ADV
fuelectenerg-1260	421	11	slow	slow	ADJ
fuelectenerg-1260	421	12	for	for	ADP
fuelectenerg-1260	421	13	interactive	interactive	ADJ
fuelectenerg-1260	421	14	modelling	modelling	NOUN
fuelectenerg-1260	421	15	.	.	PUNCT
fuelectenerg-1260	422	1	there	there	PRON
fuelectenerg-1260	422	2	is	be	VERB
fuelectenerg-1260	422	3	another	another	DET
fuelectenerg-1260	422	4	issue	issue	NOUN
fuelectenerg-1260	422	5	:	:	PUNCT
fuelectenerg-1260	422	6	the	the	DET
fuelectenerg-1260	422	7	physical	physical	ADJ
fuelectenerg-1260	422	8	domain	domain	NOUN
fuelectenerg-1260	422	9	.	.	PUNCT
fuelectenerg-1260	423	1	mems	mem	NOUN
fuelectenerg-1260	423	2	can	can	AUX
fuelectenerg-1260	423	3	be	be	AUX
fuelectenerg-1260	423	4	microscopic	microscopic	ADJ
fuelectenerg-1260	423	5	or	or	CCONJ
fuelectenerg-1260	423	6	macroscopic	macroscopic	ADJ
fuelectenerg-1260	423	7	.	.	PUNCT
fuelectenerg-1260	424	1	the	the	DET
fuelectenerg-1260	424	2	boundary	boundary	NOUN
fuelectenerg-1260	424	3	for	for	ADP
fuelectenerg-1260	424	4	the	the	DET
fuelectenerg-1260	424	5	separation	separation	NOUN
fuelectenerg-1260	424	6	of	of	ADP
fuelectenerg-1260	424	7	the	the	DET
fuelectenerg-1260	424	8	dominant	dominant	ADJ
fuelectenerg-1260	424	9	physical	physical	ADJ
fuelectenerg-1260	424	10	forces	force	NOUN
fuelectenerg-1260	424	11	(	(	PUNCT
fuelectenerg-1260	424	12	e.g.	e.g.	ADV
fuelectenerg-1260	424	13	inertia	inertia	NOUN
fuelectenerg-1260	424	14	and	and	CCONJ
fuelectenerg-1260	424	15	gravity	gravity	NOUN
fuelectenerg-1260	424	16	vs.	vs.	ADP
fuelectenerg-1260	424	17	adhesion	adhesion	NOUN
fuelectenerg-1260	424	18	,	,	PUNCT
fuelectenerg-1260	424	19	capillarity	capillarity	NOUN
fuelectenerg-1260	424	20	etc	etc	X
fuelectenerg-1260	424	21	)	)	PUNCT
fuelectenerg-1260	424	22	is	be	AUX
fuelectenerg-1260	424	23	hazy	hazy	ADJ
fuelectenerg-1260	424	24	to	to	PART
fuelectenerg-1260	424	25	say	say	VERB
fuelectenerg-1260	424	26	the	the	DET
fuelectenerg-1260	424	27	least	least	ADJ
fuelectenerg-1260	424	28	.	.	PUNCT
fuelectenerg-1260	425	1	this	this	PRON
fuelectenerg-1260	425	2	is	be	AUX
fuelectenerg-1260	425	3	crucial	crucial	ADJ
fuelectenerg-1260	425	4	for	for	ADP
fuelectenerg-1260	425	5	the	the	DET
fuelectenerg-1260	425	6	distinction	distinction	NOUN
fuelectenerg-1260	425	7	of	of	ADP
fuelectenerg-1260	425	8	fluidic	fluidic	ADJ
fuelectenerg-1260	425	9	and	and	CCONJ
fuelectenerg-1260	425	10	microfluidic	microfluidic	ADJ
fuelectenerg-1260	425	11	modelling	modelling	NOUN
fuelectenerg-1260	425	12	,	,	PUNCT
fuelectenerg-1260	425	13	because	because	SCONJ
fuelectenerg-1260	425	14	the	the	DET
fuelectenerg-1260	425	15	viscosity	viscosity	NOUN
fuelectenerg-1260	425	16	and	and	CCONJ
fuelectenerg-1260	425	17	channel	channel	NOUN
fuelectenerg-1260	425	18	materials	material	NOUN
fuelectenerg-1260	425	19	affect	affect	VERB
fuelectenerg-1260	425	20	the	the	DET
fuelectenerg-1260	425	21	slip	slip	NOUN
fuelectenerg-1260	425	22	length	length	NOUN
fuelectenerg-1260	425	23	which	which	PRON
fuelectenerg-1260	425	24	in	in	ADP
fuelectenerg-1260	425	25	turn	turn	NOUN
fuelectenerg-1260	425	26	affects	affect	VERB
fuelectenerg-1260	425	27	the	the	DET
fuelectenerg-1260	425	28	reynolds	reynold	NOUN
fuelectenerg-1260	425	29	number	number	NOUN
fuelectenerg-1260	425	30	and	and	CCONJ
fuelectenerg-1260	425	31	depends	depend	VERB
fuelectenerg-1260	425	32	on	on	ADP
fuelectenerg-1260	425	33	the	the	DET
fuelectenerg-1260	425	34	pumping	pump	VERB
fuelectenerg-1260	425	35	speed	speed	NOUN
fuelectenerg-1260	425	36	or	or	CCONJ
fuelectenerg-1260	425	37	flow	flow	NOUN
fuelectenerg-1260	425	38	rate	rate	NOUN
fuelectenerg-1260	425	39	and	and	CCONJ
fuelectenerg-1260	425	40	the	the	DET
fuelectenerg-1260	425	41	physical	physical	ADJ
fuelectenerg-1260	425	42	characteristics	characteristic	NOUN
fuelectenerg-1260	425	43	like	like	ADP
fuelectenerg-1260	425	44	size	size	NOUN
fuelectenerg-1260	425	45	,	,	PUNCT
fuelectenerg-1260	425	46	hydrophyllia	hydrophyllia	NOUN
fuelectenerg-1260	425	47	or	or	CCONJ
fuelectenerg-1260	425	48	hydrophobia	hydrophobia	NOUN
fuelectenerg-1260	425	49	of	of	ADP
fuelectenerg-1260	425	50	the	the	DET
fuelectenerg-1260	425	51	channel	channel	NOUN
fuelectenerg-1260	426	1	[	[	X
fuelectenerg-1260	426	2	75	75	NUM
fuelectenerg-1260	426	3	]	]	PUNCT
fuelectenerg-1260	426	4	.	.	PUNCT
fuelectenerg-1260	427	1	in	in	ADP
fuelectenerg-1260	427	2	addition	addition	NOUN
fuelectenerg-1260	427	3	,	,	PUNCT
fuelectenerg-1260	427	4	a	a	DET
fuelectenerg-1260	427	5	novice	novice	NOUN
fuelectenerg-1260	427	6	mems	mem	NOUN
fuelectenerg-1260	427	7	designer	designer	NOUN
fuelectenerg-1260	427	8	would	would	AUX
fuelectenerg-1260	427	9	rarely	rarely	ADV
fuelectenerg-1260	427	10	be	be	AUX
fuelectenerg-1260	427	11	familiar	familiar	ADJ
fuelectenerg-1260	427	12	with	with	ADP
fuelectenerg-1260	427	13	the	the	DET
fuelectenerg-1260	427	14	rather	rather	ADV
fuelectenerg-1260	427	15	specialised	specialised	ADJ
fuelectenerg-1260	427	16	topic	topic	NOUN
fuelectenerg-1260	427	17	of	of	ADP
fuelectenerg-1260	427	18	navier	navier	NOUN
fuelectenerg-1260	427	19	stokes	stoke	VERB
fuelectenerg-1260	427	20	equation	equation	NOUN
fuelectenerg-1260	427	21	systems	system	NOUN
fuelectenerg-1260	427	22	for	for	ADP
fuelectenerg-1260	427	23	fluid	fluid	ADJ
fuelectenerg-1260	427	24	modelling	modelling	NOUN
fuelectenerg-1260	427	25	.	.	PUNCT
fuelectenerg-1260	428	1	in	in	ADP
fuelectenerg-1260	428	2	a	a	DET
fuelectenerg-1260	428	3	systematic	systematic	ADJ
fuelectenerg-1260	428	4	fea	fea	NOUN
fuelectenerg-1260	428	5	analysis	analysis	NOUN
fuelectenerg-1260	428	6	,	,	PUNCT
fuelectenerg-1260	428	7	we	we	PRON
fuelectenerg-1260	428	8	have	have	AUX
fuelectenerg-1260	428	9	simulated	simulate	VERB
fuelectenerg-1260	428	10	microfluidic	microfluidic	ADJ
fuelectenerg-1260	428	11	flow	flow	NOUN
fuelectenerg-1260	428	12	by	by	ADP
fuelectenerg-1260	428	13	varying	vary	VERB
fuelectenerg-1260	428	14	stepwise	stepwise	NOUN
fuelectenerg-1260	428	15	a	a	DET
fuelectenerg-1260	428	16	set	set	NOUN
fuelectenerg-1260	428	17	of	of	ADP
fuelectenerg-1260	428	18	parameters	parameter	NOUN
fuelectenerg-1260	428	19	to	to	PART
fuelectenerg-1260	428	20	find	find	VERB
fuelectenerg-1260	428	21	the	the	DET
fuelectenerg-1260	428	22	distinction	distinction	NOUN
fuelectenerg-1260	428	23	between	between	ADP
fuelectenerg-1260	428	24	laminar	laminar	ADJ
fuelectenerg-1260	428	25	and	and	CCONJ
fuelectenerg-1260	428	26	turbulent	turbulent	ADJ
fuelectenerg-1260	428	27	flow	flow	NOUN
fuelectenerg-1260	428	28	[	[	X
fuelectenerg-1260	428	29	76	76	NUM
fuelectenerg-1260	428	30	]	]	X
fuelectenerg-1260	428	31	.	.	PUNCT
fuelectenerg-1260	429	1	such	such	ADJ
fuelectenerg-1260	429	2	subtle	subtle	ADJ
fuelectenerg-1260	429	3	details	detail	NOUN
fuelectenerg-1260	429	4	affect	affect	VERB
fuelectenerg-1260	429	5	the	the	DET
fuelectenerg-1260	429	6	mathematical	mathematical	ADJ
fuelectenerg-1260	429	7	modelling	modelling	NOUN
fuelectenerg-1260	429	8	,	,	PUNCT
fuelectenerg-1260	429	9	hence	hence	ADV
fuelectenerg-1260	429	10	the	the	DET
fuelectenerg-1260	429	11	outcome	outcome	NOUN
fuelectenerg-1260	429	12	,	,	PUNCT
fuelectenerg-1260	429	13	but	but	CCONJ
fuelectenerg-1260	429	14	this	this	PRON
fuelectenerg-1260	429	15	is	be	AUX
fuelectenerg-1260	429	16	important	important	ADJ
fuelectenerg-1260	429	17	in	in	ADP
fuelectenerg-1260	429	18	the	the	DET
fuelectenerg-1260	429	19	vast	vast	ADJ
fuelectenerg-1260	429	20	area	area	NOUN
fuelectenerg-1260	429	21	of	of	ADP
fuelectenerg-1260	429	22	chemical	chemical	NOUN
fuelectenerg-1260	429	23	and	and	CCONJ
fuelectenerg-1260	429	24	medical	medical	ADJ
fuelectenerg-1260	429	25	analysis	analysis	NOUN
fuelectenerg-1260	429	26	.	.	PUNCT
fuelectenerg-1260	430	1	the	the	DET
fuelectenerg-1260	430	2	interactive	interactive	ADJ
fuelectenerg-1260	430	3	vp	vp	PROPN
fuelectenerg-1260	430	4	environment	environment	NOUN
fuelectenerg-1260	430	5	must	must	AUX
fuelectenerg-1260	430	6	be	be	AUX
fuelectenerg-1260	430	7	equipped	equip	VERB
fuelectenerg-1260	430	8	with	with	ADP
fuelectenerg-1260	430	9	recommended	recommend	VERB
fuelectenerg-1260	430	10	model	model	NOUN
fuelectenerg-1260	430	11	guidance	guidance	NOUN
fuelectenerg-1260	430	12	in	in	ADP
fuelectenerg-1260	430	13	(	(	PUNCT
fuelectenerg-1260	430	14	e.g.	e.g.	ADV
fuelectenerg-1260	430	15	like	like	ADP
fuelectenerg-1260	430	16	a	a	DET
fuelectenerg-1260	430	17	pop	pop	NOUN
fuelectenerg-1260	430	18	up	up	ADP
fuelectenerg-1260	430	19	alerting	alert	VERB
fuelectenerg-1260	430	20	to	to	PART
fuelectenerg-1260	430	21	turn	turn	VERB
fuelectenerg-1260	430	22	on	on	ADP
fuelectenerg-1260	430	23	a	a	DET
fuelectenerg-1260	430	24	menu	menu	NOUN
fuelectenerg-1260	430	25	for	for	ADP
fuelectenerg-1260	430	26	specific	specific	ADJ
fuelectenerg-1260	430	27	parameter	parameter	NOUN
fuelectenerg-1260	430	28	setting	set	VERB
fuelectenerg-1260	430	29	combinations	combination	NOUN
fuelectenerg-1260	430	30	)	)	PUNCT
fuelectenerg-1260	430	31	.	.	PUNCT
fuelectenerg-1260	431	1	6.2	6.2	NUM
fuelectenerg-1260	431	2	.	.	PUNCT
fuelectenerg-1260	431	3	fluid	fluid	ADJ
fuelectenerg-1260	431	4	flow	flow	NOUN
fuelectenerg-1260	431	5	in	in	ADP
fuelectenerg-1260	431	6	a	a	DET
fuelectenerg-1260	431	7	microchannel	microchannel	NOUN
fuelectenerg-1260	431	8	,	,	PUNCT
fuelectenerg-1260	431	9	the	the	DET
fuelectenerg-1260	431	10	fluid	fluid	NOUN
fuelectenerg-1260	431	11	is	be	AUX
fuelectenerg-1260	431	12	flowing	flow	VERB
fuelectenerg-1260	431	13	at	at	ADP
fuelectenerg-1260	431	14	very	very	ADV
fuelectenerg-1260	431	15	high	high	ADJ
fuelectenerg-1260	431	16	velocity	velocity	NOUN
fuelectenerg-1260	431	17	.	.	PUNCT
fuelectenerg-1260	432	1	this	this	DET
fuelectenerg-1260	432	2	velocity	velocity	NOUN
fuelectenerg-1260	432	3	is	be	AUX
fuelectenerg-1260	432	4	different	different	ADJ
fuelectenerg-1260	432	5	throughout	throughout	ADP
fuelectenerg-1260	432	6	the	the	DET
fuelectenerg-1260	432	7	channel	channel	NOUN
fuelectenerg-1260	432	8	:	:	PUNCT
fuelectenerg-1260	432	9	it	it	PRON
fuelectenerg-1260	432	10	flows	flow	VERB
fuelectenerg-1260	432	11	at	at	ADP
fuelectenerg-1260	432	12	different	different	ADJ
fuelectenerg-1260	432	13	rates	rate	NOUN
fuelectenerg-1260	432	14	in	in	ADP
fuelectenerg-1260	432	15	different	different	ADJ
fuelectenerg-1260	432	16	regions	region	NOUN
fuelectenerg-1260	432	17	.	.	PUNCT
fuelectenerg-1260	433	1	for	for	ADP
fuelectenerg-1260	433	2	example	example	NOUN
fuelectenerg-1260	433	3	in	in	ADP
fuelectenerg-1260	433	4	the	the	DET
fuelectenerg-1260	433	5	centre	centre	NOUN
fuelectenerg-1260	433	6	of	of	ADP
fuelectenerg-1260	433	7	a	a	DET
fuelectenerg-1260	433	8	square	square	ADJ
fuelectenerg-1260	433	9	section	section	NOUN
fuelectenerg-1260	433	10	microchannel	microchannel	NOUN
fuelectenerg-1260	433	11	with	with	ADP
fuelectenerg-1260	433	12	152	152	NUM
fuelectenerg-1260	433	13	m	m	PROPN
fuelectenerg-1260	433	14	sides	side	NOUN
fuelectenerg-1260	433	15	,	,	PUNCT
fuelectenerg-1260	433	16	the	the	DET
fuelectenerg-1260	433	17	flow	flow	NOUN
fuelectenerg-1260	433	18	has	have	VERB
fuelectenerg-1260	433	19	a	a	DET
fuelectenerg-1260	433	20	velocity	velocity	NOUN
fuelectenerg-1260	433	21	of	of	ADP
fuelectenerg-1260	433	22	8.3e10	8.3e10	NUM
fuelectenerg-1260	433	23	m	m	PROPN
fuelectenerg-1260	433	24	/	/	SYM
fuelectenerg-1260	433	25	s	s	PROPN
fuelectenerg-1260	433	26	,	,	PUNCT
fuelectenerg-1260	433	27	while	while	SCONJ
fuelectenerg-1260	433	28	towards	towards	ADP
fuelectenerg-1260	433	29	the	the	DET
fuelectenerg-1260	433	30	channel	channel	NOUN
fuelectenerg-1260	433	31	walls	wall	NOUN
fuelectenerg-1260	433	32	the	the	DET
fuelectenerg-1260	433	33	velocity	velocity	NOUN
fuelectenerg-1260	433	34	drops	drop	VERB
fuelectenerg-1260	433	35	to	to	ADP
fuelectenerg-1260	433	36	2/3	2/3	NUM
fuelectenerg-1260	433	37	of	of	ADP
fuelectenerg-1260	433	38	the	the	DET
fuelectenerg-1260	433	39	maximal	maximal	ADJ
fuelectenerg-1260	433	40	velocity	velocity	NOUN
fuelectenerg-1260	433	41	,	,	PUNCT
fuelectenerg-1260	433	42	and	and	CCONJ
fuelectenerg-1260	433	43	touching	touch	VERB
fuelectenerg-1260	433	44	the	the	DET
fuelectenerg-1260	433	45	walls	wall	NOUN
fuelectenerg-1260	433	46	it	it	PRON
fuelectenerg-1260	433	47	flows	flow	VERB
fuelectenerg-1260	433	48	only	only	ADV
fuelectenerg-1260	433	49	at	at	ADP
fuelectenerg-1260	433	50	¼	¼	NOUN
fuelectenerg-1260	433	51	of	of	ADP
fuelectenerg-1260	433	52	that	that	DET
fuelectenerg-1260	433	53	velocity	velocity	NOUN
fuelectenerg-1260	433	54	.	.	PUNCT
fuelectenerg-1260	434	1	this	this	DET
fuelectenerg-1260	434	2	velocity	velocity	NOUN
fuelectenerg-1260	434	3	reduction	reduction	NOUN
fuelectenerg-1260	434	4	is	be	AUX
fuelectenerg-1260	434	5	due	due	ADJ
fuelectenerg-1260	434	6	to	to	ADP
fuelectenerg-1260	434	7	an	an	DET
fuelectenerg-1260	434	8	electric	electric	ADJ
fuelectenerg-1260	434	9	friction	friction	NOUN
fuelectenerg-1260	434	10	with	with	ADP
fuelectenerg-1260	434	11	the	the	DET
fuelectenerg-1260	434	12	walls	wall	NOUN
fuelectenerg-1260	434	13	of	of	ADP
fuelectenerg-1260	434	14	the	the	DET
fuelectenerg-1260	434	15	microchannel	microchannel	NOUN
fuelectenerg-1260	434	16	,	,	PUNCT
fuelectenerg-1260	434	17	pulling	pull	VERB
fuelectenerg-1260	434	18	into	into	ADP
fuelectenerg-1260	434	19	the	the	DET
fuelectenerg-1260	434	20	opposite	opposite	ADJ
fuelectenerg-1260	434	21	direction	direction	NOUN
fuelectenerg-1260	434	22	as	as	ADP
fuelectenerg-1260	434	23	the	the	DET
fuelectenerg-1260	434	24	flow	flow	NOUN
fuelectenerg-1260	434	25	and	and	CCONJ
fuelectenerg-1260	434	26	it	it	PRON
fuelectenerg-1260	434	27	is	be	AUX
fuelectenerg-1260	434	28	induced	induce	VERB
fuelectenerg-1260	434	29	by	by	ADP
fuelectenerg-1260	434	30	the	the	DET
fuelectenerg-1260	434	31	high	high	ADJ
fuelectenerg-1260	434	32	velocity	velocity	NOUN
fuelectenerg-1260	434	33	of	of	ADP
fuelectenerg-1260	434	34	the	the	DET
fuelectenerg-1260	434	35	fluid	fluid	ADJ
fuelectenerg-1260	434	36	flow	flow	NOUN
fuelectenerg-1260	434	37	in	in	ADP
fuelectenerg-1260	434	38	the	the	DET
fuelectenerg-1260	434	39	channel	channel	NOUN
fuelectenerg-1260	434	40	.	.	PUNCT
fuelectenerg-1260	435	1	in	in	ADP
fuelectenerg-1260	435	2	our	our	PRON
fuelectenerg-1260	435	3	research	research	NOUN
fuelectenerg-1260	435	4	,	,	PUNCT
fuelectenerg-1260	435	5	we	we	PRON
fuelectenerg-1260	435	6	have	have	AUX
fuelectenerg-1260	435	7	been	be	AUX
fuelectenerg-1260	435	8	looking	look	VERB
fuelectenerg-1260	435	9	for	for	ADP
fuelectenerg-1260	435	10	valid	valid	ADJ
fuelectenerg-1260	435	11	replacements	replacement	NOUN
fuelectenerg-1260	435	12	for	for	ADP
fuelectenerg-1260	435	13	finite	finite	ADJ
fuelectenerg-1260	435	14	element	element	NOUN
fuelectenerg-1260	435	15	calculations	calculation	NOUN
fuelectenerg-1260	435	16	because	because	SCONJ
fuelectenerg-1260	435	17	they	they	PRON
fuelectenerg-1260	435	18	are	be	AUX
fuelectenerg-1260	435	19	too	too	ADV
fuelectenerg-1260	435	20	slow	slow	ADJ
fuelectenerg-1260	435	21	.	.	PUNCT
fuelectenerg-1260	436	1	we	we	PRON
fuelectenerg-1260	436	2	have	have	AUX
fuelectenerg-1260	436	3	investigated	investigate	VERB
fuelectenerg-1260	436	4	new	new	ADJ
fuelectenerg-1260	436	5	models	model	NOUN
fuelectenerg-1260	436	6	for	for	ADP
fuelectenerg-1260	436	7	laminar	laminar	ADJ
fuelectenerg-1260	436	8	and	and	CCONJ
fuelectenerg-1260	436	9	turbulent	turbulent	ADJ
fuelectenerg-1260	436	10	flow	flow	NOUN
fuelectenerg-1260	436	11	of	of	ADP
fuelectenerg-1260	436	12	microfluidics	microfluidic	NOUN
fuelectenerg-1260	436	13	in	in	ADP
fuelectenerg-1260	436	14	a	a	DET
fuelectenerg-1260	436	15	channel	channel	NOUN
fuelectenerg-1260	436	16	,	,	PUNCT
fuelectenerg-1260	436	17	for	for	ADP
fuelectenerg-1260	436	18	example	example	NOUN
fuelectenerg-1260	436	19	how	how	SCONJ
fuelectenerg-1260	436	20	to	to	PART
fuelectenerg-1260	436	21	model	model	VERB
fuelectenerg-1260	436	22	an	an	DET
fuelectenerg-1260	436	23	inversion	inversion	NOUN
fuelectenerg-1260	436	24	layer	layer	NOUN
fuelectenerg-1260	436	25	in	in	ADP
fuelectenerg-1260	436	26	a	a	DET
fuelectenerg-1260	436	27	channel	channel	NOUN
fuelectenerg-1260	436	28	.	.	PUNCT
fuelectenerg-1260	437	1	we	we	PRON
fuelectenerg-1260	437	2	use	use	VERB
fuelectenerg-1260	437	3	a	a	DET
fuelectenerg-1260	437	4	layer	layer	NOUN
fuelectenerg-1260	437	5	model	model	NOUN
fuelectenerg-1260	437	6	for	for	ADP
fuelectenerg-1260	437	7	the	the	DET
fuelectenerg-1260	437	8	different	different	ADJ
fuelectenerg-1260	437	9	velocities	velocity	NOUN
fuelectenerg-1260	437	10	as	as	SCONJ
fuelectenerg-1260	437	11	if	if	SCONJ
fuelectenerg-1260	437	12	they	they	PRON
fuelectenerg-1260	437	13	were	be	AUX
fuelectenerg-1260	437	14	distinct	distinct	ADJ
fuelectenerg-1260	437	15	strata	strata	NOUN
fuelectenerg-1260	437	16	.	.	PUNCT
fuelectenerg-1260	438	1	this	this	PRON
fuelectenerg-1260	438	2	is	be	AUX
fuelectenerg-1260	438	3	shown	show	VERB
fuelectenerg-1260	438	4	in	in	ADP
fuelectenerg-1260	438	5	figure	figure	NOUN
fuelectenerg-1260	438	6	3	3	NUM
fuelectenerg-1260	438	7	.	.	PUNCT
fuelectenerg-1260	439	1	those	those	DET
fuelectenerg-1260	439	2	layers	layer	NOUN
fuelectenerg-1260	439	3	next	next	ADV
fuelectenerg-1260	439	4	to	to	ADP
fuelectenerg-1260	439	5	the	the	DET
fuelectenerg-1260	439	6	channel	channel	NOUN
fuelectenerg-1260	439	7	walls	wall	NOUN
fuelectenerg-1260	439	8	rub	rub	VERB
fuelectenerg-1260	439	9	against	against	ADP
fuelectenerg-1260	439	10	it	it	PRON
fuelectenerg-1260	439	11	producing	produce	VERB
fuelectenerg-1260	439	12	friction	friction	NOUN
fuelectenerg-1260	439	13	and	and	CCONJ
fuelectenerg-1260	439	14	to	to	ADP
fuelectenerg-1260	439	15	lesser	less	ADJ
fuelectenerg-1260	439	16	extent	extent	NOUN
fuelectenerg-1260	439	17	,	,	PUNCT
fuelectenerg-1260	439	18	they	they	PRON
fuelectenerg-1260	439	19	slow	slow	VERB
fuelectenerg-1260	439	20	down	down	ADP
fuelectenerg-1260	439	21	the	the	DET
fuelectenerg-1260	439	22	adjacent	adjacent	ADJ
fuelectenerg-1260	439	23	layer	layer	NOUN
fuelectenerg-1260	439	24	,	,	PUNCT
fuelectenerg-1260	439	25	which	which	PRON
fuelectenerg-1260	439	26	in	in	ADP
fuelectenerg-1260	439	27	turn	turn	NOUN
fuelectenerg-1260	439	28	also	also	ADV
fuelectenerg-1260	439	29	exerts	exert	VERB
fuelectenerg-1260	439	30	friction	friction	NOUN
fuelectenerg-1260	439	31	on	on	ADP
fuelectenerg-1260	439	32	the	the	DET
fuelectenerg-1260	439	33	next	next	ADJ
fuelectenerg-1260	439	34	layer	layer	NOUN
fuelectenerg-1260	439	35	and	and	CCONJ
fuelectenerg-1260	439	36	so	so	ADV
fuelectenerg-1260	439	37	on	on	ADV
fuelectenerg-1260	439	38	.	.	PUNCT
fuelectenerg-1260	440	1	in	in	ADP
fuelectenerg-1260	440	2	the	the	DET
fuelectenerg-1260	440	3	centre	centre	NOUN
fuelectenerg-1260	440	4	,	,	PUNCT
fuelectenerg-1260	440	5	fig	fig	NOUN
fuelectenerg-1260	440	6	.	.	PUNCT
fuelectenerg-1260	441	1	3	3	NUM
fuelectenerg-1260	441	2	vr	vr	PROPN
fuelectenerg-1260	441	3	simulation	simulation	NOUN
fuelectenerg-1260	441	4	of	of	ADP
fuelectenerg-1260	441	5	fluid	fluid	NOUN
fuelectenerg-1260	441	6	entering	enter	VERB
fuelectenerg-1260	441	7	the	the	DET
fuelectenerg-1260	441	8	channel	channel	NOUN
fuelectenerg-1260	441	9	and	and	CCONJ
fuelectenerg-1260	441	10	formation	formation	NOUN
fuelectenerg-1260	441	11	of	of	ADP
fuelectenerg-1260	441	12	the	the	DET
fuelectenerg-1260	441	13	bullet	bullet	NOUN
fuelectenerg-1260	441	14	nose	nose	NOUN
fuelectenerg-1260	441	15	as	as	SCONJ
fuelectenerg-1260	441	16	it	it	PRON
fuelectenerg-1260	441	17	moves	move	VERB
fuelectenerg-1260	441	18	at	at	ADP
fuelectenerg-1260	441	19	different	different	ADJ
fuelectenerg-1260	441	20	velocities	velocity	NOUN
fuelectenerg-1260	441	21	(	(	PUNCT
fuelectenerg-1260	441	22	coloured	coloured	ADJ
fuelectenerg-1260	441	23	layers	layer	NOUN
fuelectenerg-1260	441	24	)	)	PUNCT
fuelectenerg-1260	441	25	.	.	PUNCT
fuelectenerg-1260	442	1	the	the	DET
fuelectenerg-1260	442	2	vertical	vertical	ADJ
fuelectenerg-1260	442	3	stripes	stripe	NOUN
fuelectenerg-1260	442	4	of	of	ADP
fuelectenerg-1260	442	5	the	the	DET
fuelectenerg-1260	442	6	flow	flow	NOUN
fuelectenerg-1260	442	7	are	be	AUX
fuelectenerg-1260	442	8	to	to	PART
fuelectenerg-1260	442	9	distinguish	distinguish	VERB
fuelectenerg-1260	442	10	the	the	DET
fuelectenerg-1260	442	11	movement	movement	NOUN
fuelectenerg-1260	442	12	.	.	PUNCT
fuelectenerg-1260	443	1	to	to	ADP
fuelectenerg-1260	443	2	the	the	DET
fuelectenerg-1260	443	3	lower	low	ADJ
fuelectenerg-1260	443	4	right	right	NOUN
fuelectenerg-1260	443	5	are	be	AUX
fuelectenerg-1260	443	6	user	user	NOUN
fuelectenerg-1260	443	7	visualization	visualization	NOUN
fuelectenerg-1260	443	8	controls	control	NOUN
fuelectenerg-1260	443	9	(	(	PUNCT
fuelectenerg-1260	443	10	blue	blue	ADJ
fuelectenerg-1260	443	11	/	/	SYM
fuelectenerg-1260	443	12	green	green	NOUN
fuelectenerg-1260	443	13	)	)	PUNCT
fuelectenerg-1260	444	1	[	[	X
fuelectenerg-1260	444	2	73	73	NUM
fuelectenerg-1260	444	3	]	]	PUNCT
fuelectenerg-1260	444	4	.	.	PUNCT
fuelectenerg-1260	445	1	26	26	NUM
fuelectenerg-1260	445	2	r.	r.	PROPN
fuelectenerg-1260	445	3	sitte	sitte	PROPN
fuelectenerg-1260	445	4	the	the	DET
fuelectenerg-1260	445	5	particles	particle	NOUN
fuelectenerg-1260	445	6	move	move	VERB
fuelectenerg-1260	445	7	at	at	ADP
fuelectenerg-1260	445	8	high	high	ADJ
fuelectenerg-1260	445	9	speed	speed	NOUN
fuelectenerg-1260	445	10	because	because	SCONJ
fuelectenerg-1260	445	11	there	there	PRON
fuelectenerg-1260	445	12	is	be	VERB
fuelectenerg-1260	445	13	little	little	ADJ
fuelectenerg-1260	445	14	or	or	CCONJ
fuelectenerg-1260	445	15	no	no	PRON
fuelectenerg-1260	445	16	friction	friction	NOUN
fuelectenerg-1260	445	17	anymore	anymore	ADV
fuelectenerg-1260	445	18	.	.	PUNCT
fuelectenerg-1260	446	1	in	in	ADP
fuelectenerg-1260	446	2	the	the	DET
fuelectenerg-1260	446	3	outer	outer	ADJ
fuelectenerg-1260	446	4	layers	layer	NOUN
fuelectenerg-1260	446	5	,	,	PUNCT
fuelectenerg-1260	446	6	the	the	DET
fuelectenerg-1260	446	7	particles	particle	NOUN
fuelectenerg-1260	446	8	move	move	VERB
fuelectenerg-1260	446	9	much	much	ADV
fuelectenerg-1260	446	10	slower	slow	ADJ
fuelectenerg-1260	446	11	due	due	ADP
fuelectenerg-1260	446	12	to	to	ADP
fuelectenerg-1260	446	13	the	the	DET
fuelectenerg-1260	446	14	friction	friction	NOUN
fuelectenerg-1260	446	15	with	with	ADP
fuelectenerg-1260	446	16	the	the	DET
fuelectenerg-1260	446	17	channel	channel	NOUN
fuelectenerg-1260	446	18	wall	wall	NOUN
fuelectenerg-1260	446	19	.	.	PUNCT
fuelectenerg-1260	447	1	our	our	PRON
fuelectenerg-1260	447	2	aim	aim	NOUN
fuelectenerg-1260	447	3	was	be	AUX
fuelectenerg-1260	447	4	to	to	PART
fuelectenerg-1260	447	5	model	model	VERB
fuelectenerg-1260	447	6	the	the	DET
fuelectenerg-1260	447	7	different	different	ADJ
fuelectenerg-1260	447	8	layers	layer	NOUN
fuelectenerg-1260	447	9	of	of	ADP
fuelectenerg-1260	447	10	fluids	fluid	NOUN
fuelectenerg-1260	447	11	as	as	ADP
fuelectenerg-1260	447	12	an	an	DET
fuelectenerg-1260	447	13	electrical	electrical	ADJ
fuelectenerg-1260	447	14	network	network	NOUN
fuelectenerg-1260	447	15	.	.	PUNCT
fuelectenerg-1260	448	1	to	to	PART
fuelectenerg-1260	448	2	do	do	VERB
fuelectenerg-1260	448	3	this	this	PRON
fuelectenerg-1260	448	4	we	we	PRON
fuelectenerg-1260	448	5	have	have	AUX
fuelectenerg-1260	448	6	modelled	model	VERB
fuelectenerg-1260	448	7	the	the	DET
fuelectenerg-1260	448	8	flow	flow	NOUN
fuelectenerg-1260	448	9	segmented	segment	VERB
fuelectenerg-1260	448	10	into	into	ADP
fuelectenerg-1260	448	11	layers	layer	NOUN
fuelectenerg-1260	448	12	to	to	ADP
fuelectenerg-1260	448	13	the	the	DET
fuelectenerg-1260	448	14	pertinent	pertinent	ADJ
fuelectenerg-1260	448	15	models	model	NOUN
fuelectenerg-1260	448	16	.	.	PUNCT
fuelectenerg-1260	449	1	we	we	PRON
fuelectenerg-1260	449	2	used	use	VERB
fuelectenerg-1260	449	3	first	first	ADV
fuelectenerg-1260	449	4	a	a	DET
fuelectenerg-1260	449	5	continuum	continuum	ADJ
fuelectenerg-1260	449	6	model	model	NOUN
fuelectenerg-1260	449	7	(	(	PUNCT
fuelectenerg-1260	449	8	euler	euler	NOUN
fuelectenerg-1260	449	9	and	and	CCONJ
fuelectenerg-1260	449	10	navier	navier	NOUN
fuelectenerg-1260	449	11	-	-	PUNCT
fuelectenerg-1260	449	12	stokes	stokes	PROPN
fuelectenerg-1260	449	13	)	)	PUNCT
fuelectenerg-1260	449	14	for	for	ADP
fuelectenerg-1260	449	15	incompressible	incompressible	ADJ
fuelectenerg-1260	449	16	flow	flow	NOUN
fuelectenerg-1260	449	17	(	(	PUNCT
fuelectenerg-1260	449	18	liquids	liquid	NOUN
fuelectenerg-1260	449	19	)	)	PUNCT
fuelectenerg-1260	449	20	.	.	PUNCT
fuelectenerg-1260	450	1	this	this	PRON
fuelectenerg-1260	450	2	was	be	AUX
fuelectenerg-1260	450	3	done	do	VERB
fuelectenerg-1260	450	4	by	by	ADP
fuelectenerg-1260	450	5	solving	solve	VERB
fuelectenerg-1260	450	6	the	the	DET
fuelectenerg-1260	450	7	navier	navier	NOUN
fuelectenerg-1260	450	8	-	-	PUNCT
fuelectenerg-1260	450	9	stokes	stoke	NOUN
fuelectenerg-1260	450	10	equation	equation	NOUN
fuelectenerg-1260	450	11	,	,	PUNCT
fuelectenerg-1260	450	12	obtaining	obtain	VERB
fuelectenerg-1260	450	13	an	an	DET
fuelectenerg-1260	450	14	analytical	analytical	ADJ
fuelectenerg-1260	450	15	model	model	NOUN
fuelectenerg-1260	450	16	for	for	ADP
fuelectenerg-1260	450	17	the	the	DET
fuelectenerg-1260	450	18	circular	circular	NOUN
fuelectenerg-1260	450	19	and	and	CCONJ
fuelectenerg-1260	450	20	a	a	DET
fuelectenerg-1260	450	21	numerical	numerical	ADJ
fuelectenerg-1260	450	22	model	model	NOUN
fuelectenerg-1260	450	23	for	for	ADP
fuelectenerg-1260	450	24	the	the	DET
fuelectenerg-1260	450	25	rectangular	rectangular	ADJ
fuelectenerg-1260	450	26	channels	channel	NOUN
fuelectenerg-1260	450	27	.	.	PUNCT
fuelectenerg-1260	451	1	these	these	PRON
fuelectenerg-1260	451	2	were	be	AUX
fuelectenerg-1260	451	3	then	then	ADV
fuelectenerg-1260	451	4	used	use	VERB
fuelectenerg-1260	451	5	to	to	PART
fuelectenerg-1260	451	6	model	model	VERB
fuelectenerg-1260	451	7	the	the	DET
fuelectenerg-1260	451	8	layers	layer	NOUN
fuelectenerg-1260	451	9	as	as	ADP
fuelectenerg-1260	451	10	an	an	DET
fuelectenerg-1260	451	11	electrical	electrical	ADJ
fuelectenerg-1260	451	12	network	network	NOUN
fuelectenerg-1260	451	13	model	model	NOUN
fuelectenerg-1260	451	14	in	in	ADP
fuelectenerg-1260	451	15	matlab	matlab	PROPN
fuelectenerg-1260	451	16	simulink	simulink	PROPN
fuelectenerg-1260	451	17	.	.	PUNCT
fuelectenerg-1260	452	1	the	the	DET
fuelectenerg-1260	452	2	resistances	resistance	NOUN
fuelectenerg-1260	452	3	of	of	ADP
fuelectenerg-1260	452	4	the	the	DET
fuelectenerg-1260	452	5	layers	layer	NOUN
fuelectenerg-1260	452	6	are	be	AUX
fuelectenerg-1260	452	7	obtained	obtain	VERB
fuelectenerg-1260	452	8	from	from	ADP
fuelectenerg-1260	452	9	the	the	DET
fuelectenerg-1260	452	10	velocity	velocity	NOUN
fuelectenerg-1260	452	11	profile	profile	NOUN
fuelectenerg-1260	452	12	of	of	ADP
fuelectenerg-1260	452	13	the	the	DET
fuelectenerg-1260	452	14	flow	flow	NOUN
fuelectenerg-1260	452	15	.	.	PUNCT
fuelectenerg-1260	453	1	compared	compare	VERB
fuelectenerg-1260	453	2	with	with	ADP
fuelectenerg-1260	453	3	ansys	ansys	PROPN
fuelectenerg-1260	453	4	,	,	PUNCT
fuelectenerg-1260	453	5	our	our	PRON
fuelectenerg-1260	453	6	electric	electric	ADJ
fuelectenerg-1260	453	7	network	network	NOUN
fuelectenerg-1260	453	8	model	model	NOUN
fuelectenerg-1260	453	9	for	for	ADP
fuelectenerg-1260	453	10	the	the	DET
fuelectenerg-1260	453	11	circular	circular	ADJ
fuelectenerg-1260	453	12	microchannel	microchannel	NOUN
fuelectenerg-1260	453	13	gives	give	VERB
fuelectenerg-1260	453	14	percentage	percentage	NOUN
fuelectenerg-1260	453	15	errors	error	NOUN
fuelectenerg-1260	453	16	up	up	ADP
fuelectenerg-1260	453	17	to	to	ADP
fuelectenerg-1260	453	18	6.6	6.6	NUM
fuelectenerg-1260	453	19	%	%	NOUN
fuelectenerg-1260	453	20	and	and	CCONJ
fuelectenerg-1260	453	21	compared	compare	VERB
fuelectenerg-1260	453	22	with	with	ADP
fuelectenerg-1260	453	23	hagen	hagen	NOUN
fuelectenerg-1260	453	24	-	-	PUNCT
fuelectenerg-1260	453	25	poiseuille	poiseuille	NOUN
fuelectenerg-1260	453	26	equation	equation	NOUN
fuelectenerg-1260	453	27	,	,	PUNCT
fuelectenerg-1260	453	28	the	the	DET
fuelectenerg-1260	453	29	error	error	NOUN
fuelectenerg-1260	453	30	is	be	AUX
fuelectenerg-1260	453	31	below	below	ADP
fuelectenerg-1260	453	32	5.22	5.22	NUM
fuelectenerg-1260	453	33	%	%	NOUN
fuelectenerg-1260	453	34	.	.	PUNCT
fuelectenerg-1260	454	1	one	one	PRON
fuelectenerg-1260	454	2	must	must	AUX
fuelectenerg-1260	454	3	bear	bear	VERB
fuelectenerg-1260	454	4	in	in	ADP
fuelectenerg-1260	454	5	mind	mind	NOUN
fuelectenerg-1260	454	6	that	that	SCONJ
fuelectenerg-1260	454	7	ansis	ansis	NOUN
fuelectenerg-1260	454	8	’	'	PUNCT
fuelectenerg-1260	454	9	error	error	NOUN
fuelectenerg-1260	454	10	can	can	AUX
fuelectenerg-1260	454	11	reach	reach	VERB
fuelectenerg-1260	454	12	up	up	ADP
fuelectenerg-1260	454	13	to	to	PART
fuelectenerg-1260	454	14	10	10	NUM
fuelectenerg-1260	454	15	%	%	NOUN
fuelectenerg-1260	454	16	.	.	PUNCT
fuelectenerg-1260	455	1	this	this	PRON
fuelectenerg-1260	455	2	is	be	AUX
fuelectenerg-1260	455	3	a	a	DET
fuelectenerg-1260	455	4	satisfactory	satisfactory	ADJ
fuelectenerg-1260	455	5	result	result	NOUN
fuelectenerg-1260	455	6	for	for	ADP
fuelectenerg-1260	455	7	a	a	DET
fuelectenerg-1260	455	8	faster	fast	ADJ
fuelectenerg-1260	455	9	model	model	NOUN
fuelectenerg-1260	455	10	that	that	PRON
fuelectenerg-1260	455	11	does	do	AUX
fuelectenerg-1260	455	12	not	not	PART
fuelectenerg-1260	455	13	require	require	VERB
fuelectenerg-1260	455	14	meshing	meshing	NOUN
fuelectenerg-1260	455	15	nor	nor	CCONJ
fuelectenerg-1260	455	16	lengthy	lengthy	ADJ
fuelectenerg-1260	455	17	iterative	iterative	NOUN
fuelectenerg-1260	455	18	calculations	calculation	NOUN
fuelectenerg-1260	455	19	[	[	X
fuelectenerg-1260	455	20	77	77	NUM
fuelectenerg-1260	455	21	,	,	PUNCT
fuelectenerg-1260	455	22	78	78	NUM
fuelectenerg-1260	455	23	]	]	PUNCT
fuelectenerg-1260	455	24	.	.	PUNCT
fuelectenerg-1260	456	1	6.3	6.3	NUM
fuelectenerg-1260	456	2	.	.	PUNCT
fuelectenerg-1260	457	1	turbulences	turbulence	NOUN
fuelectenerg-1260	457	2	turbulences	turbulence	NOUN
fuelectenerg-1260	457	3	are	be	AUX
fuelectenerg-1260	457	4	an	an	DET
fuelectenerg-1260	457	5	important	important	ADJ
fuelectenerg-1260	457	6	phenomenon	phenomenon	NOUN
fuelectenerg-1260	457	7	in	in	ADP
fuelectenerg-1260	457	8	fluidic	fluidic	ADJ
fuelectenerg-1260	457	9	mems	mem	NOUN
fuelectenerg-1260	457	10	design	design	NOUN
fuelectenerg-1260	457	11	;	;	PUNCT
fuelectenerg-1260	457	12	they	they	PRON
fuelectenerg-1260	457	13	may	may	AUX
fuelectenerg-1260	457	14	be	be	AUX
fuelectenerg-1260	457	15	desired	desire	VERB
fuelectenerg-1260	457	16	(	(	PUNCT
fuelectenerg-1260	457	17	e.g.	e.g.	ADV
fuelectenerg-1260	457	18	for	for	ADP
fuelectenerg-1260	457	19	mixing	mix	VERB
fuelectenerg-1260	457	20	fluids	fluid	NOUN
fuelectenerg-1260	457	21	in	in	ADP
fuelectenerg-1260	457	22	or	or	CCONJ
fuelectenerg-1260	457	23	undesired	undesired	ADJ
fuelectenerg-1260	457	24	(	(	PUNCT
fuelectenerg-1260	457	25	for	for	ADP
fuelectenerg-1260	457	26	medical	medical	ADJ
fuelectenerg-1260	457	27	implant	implant	ADJ
fuelectenerg-1260	457	28	medication	medication	NOUN
fuelectenerg-1260	457	29	dispensers	dispenser	NOUN
fuelectenerg-1260	457	30	)	)	PUNCT
fuelectenerg-1260	457	31	.	.	PUNCT
fuelectenerg-1260	458	1	turbulences	turbulence	NOUN
fuelectenerg-1260	458	2	have	have	VERB
fuelectenerg-1260	458	3	several	several	ADJ
fuelectenerg-1260	458	4	phases	phase	NOUN
fuelectenerg-1260	458	5	in	in	ADP
fuelectenerg-1260	458	6	their	their	PRON
fuelectenerg-1260	458	7	existence	existence	NOUN
fuelectenerg-1260	458	8	:	:	PUNCT
fuelectenerg-1260	458	9	a	a	DET
fuelectenerg-1260	458	10	beginning	beginning	NOUN
fuelectenerg-1260	458	11	,	,	PUNCT
fuelectenerg-1260	458	12	a	a	DET
fuelectenerg-1260	458	13	movement	movement	NOUN
fuelectenerg-1260	458	14	,	,	PUNCT
fuelectenerg-1260	458	15	and	and	CCONJ
fuelectenerg-1260	458	16	an	an	DET
fuelectenerg-1260	458	17	end	end	NOUN
fuelectenerg-1260	458	18	phase	phase	NOUN
fuelectenerg-1260	458	19	.	.	PUNCT
fuelectenerg-1260	459	1	the	the	PRON
fuelectenerg-1260	459	2	can	can	AUX
fuelectenerg-1260	459	3	move	move	VERB
fuelectenerg-1260	459	4	in	in	ADP
fuelectenerg-1260	459	5	rotational	rotational	ADJ
fuelectenerg-1260	459	6	or	or	CCONJ
fuelectenerg-1260	459	7	undulated	undulated	ADJ
fuelectenerg-1260	459	8	movements	movement	NOUN
fuelectenerg-1260	459	9	.	.	PUNCT
fuelectenerg-1260	460	1	initially	initially	ADV
fuelectenerg-1260	460	2	the	the	DET
fuelectenerg-1260	460	3	velocities	velocity	NOUN
fuelectenerg-1260	460	4	of	of	ADP
fuelectenerg-1260	460	5	the	the	DET
fuelectenerg-1260	460	6	fluid	fluid	NOUN
fuelectenerg-1260	460	7	can	can	AUX
fuelectenerg-1260	460	8	be	be	AUX
fuelectenerg-1260	460	9	rendered	render	VERB
fuelectenerg-1260	460	10	with	with	ADP
fuelectenerg-1260	460	11	larger	large	ADJ
fuelectenerg-1260	460	12	patches	patch	NOUN
fuelectenerg-1260	460	13	of	of	ADP
fuelectenerg-1260	460	14	colour	colour	NOUN
fuelectenerg-1260	460	15	,	,	PUNCT
fuelectenerg-1260	460	16	while	while	SCONJ
fuelectenerg-1260	460	17	as	as	SCONJ
fuelectenerg-1260	460	18	the	the	DET
fuelectenerg-1260	460	19	turbulence	turbulence	NOUN
fuelectenerg-1260	460	20	sets	set	VERB
fuelectenerg-1260	460	21	in	in	ADP
fuelectenerg-1260	460	22	,	,	PUNCT
fuelectenerg-1260	460	23	the	the	DET
fuelectenerg-1260	460	24	patches	patch	NOUN
fuelectenerg-1260	460	25	become	become	VERB
fuelectenerg-1260	460	26	increasingly	increasingly	ADV
fuelectenerg-1260	460	27	smaller	small	ADJ
fuelectenerg-1260	460	28	.	.	PUNCT
fuelectenerg-1260	461	1	this	this	PRON
fuelectenerg-1260	461	2	is	be	AUX
fuelectenerg-1260	461	3	because	because	SCONJ
fuelectenerg-1260	461	4	a	a	DET
fuelectenerg-1260	461	5	turbulent	turbulent	ADJ
fuelectenerg-1260	461	6	diffusion	diffusion	NOUN
fuelectenerg-1260	461	7	process	process	NOUN
fuelectenerg-1260	461	8	is	be	AUX
fuelectenerg-1260	461	9	ongoing	ongoing	ADJ
fuelectenerg-1260	461	10	,	,	PUNCT
fuelectenerg-1260	461	11	but	but	CCONJ
fuelectenerg-1260	461	12	the	the	DET
fuelectenerg-1260	461	13	diffusion	diffusion	NOUN
fuelectenerg-1260	461	14	is	be	AUX
fuelectenerg-1260	461	15	slow	slow	ADJ
fuelectenerg-1260	461	16	,	,	PUNCT
fuelectenerg-1260	461	17	following	follow	VERB
fuelectenerg-1260	461	18	the	the	DET
fuelectenerg-1260	461	19	swirls	swirl	NOUN
fuelectenerg-1260	461	20	and	and	CCONJ
fuelectenerg-1260	461	21	eddies	eddy	NOUN
fuelectenerg-1260	461	22	that	that	PRON
fuelectenerg-1260	461	23	characterize	characterize	VERB
fuelectenerg-1260	461	24	turbulent	turbulent	ADJ
fuelectenerg-1260	461	25	flow	flow	NOUN
fuelectenerg-1260	461	26	[	[	X
fuelectenerg-1260	461	27	79	79	NUM
fuelectenerg-1260	461	28	]	]	PUNCT
fuelectenerg-1260	461	29	.	.	PUNCT
fuelectenerg-1260	462	1	the	the	DET
fuelectenerg-1260	462	2	strict	strict	ADJ
fuelectenerg-1260	462	3	layered	layered	ADJ
fuelectenerg-1260	462	4	flow	flow	NOUN
fuelectenerg-1260	462	5	as	as	SCONJ
fuelectenerg-1260	462	6	it	it	PRON
fuelectenerg-1260	462	7	occurs	occur	VERB
fuelectenerg-1260	462	8	in	in	ADP
fuelectenerg-1260	462	9	non	non	ADJ
fuelectenerg-1260	462	10	-	-	ADJ
fuelectenerg-1260	462	11	turbulent	turbulent	ADJ
fuelectenerg-1260	462	12	fluid	fluid	NOUN
fuelectenerg-1260	462	13	starts	start	NOUN
fuelectenerg-1260	462	14	mixing	mix	VERB
fuelectenerg-1260	462	15	and	and	CCONJ
fuelectenerg-1260	462	16	some	some	DET
fuelectenerg-1260	462	17	parts	part	NOUN
fuelectenerg-1260	462	18	will	will	AUX
fuelectenerg-1260	462	19	move	move	VERB
fuelectenerg-1260	462	20	faster	fast	ADV
fuelectenerg-1260	462	21	,	,	PUNCT
fuelectenerg-1260	462	22	some	some	PRON
fuelectenerg-1260	462	23	move	move	VERB
fuelectenerg-1260	462	24	slower	slow	ADV
fuelectenerg-1260	462	25	across	across	ADP
fuelectenerg-1260	462	26	the	the	DET
fuelectenerg-1260	462	27	channel	channel	NOUN
fuelectenerg-1260	462	28	.	.	PUNCT
fuelectenerg-1260	463	1	we	we	PRON
fuelectenerg-1260	463	2	have	have	AUX
fuelectenerg-1260	463	3	developed	develop	VERB
fuelectenerg-1260	463	4	the	the	DET
fuelectenerg-1260	463	5	cluster	cluster	NOUN
fuelectenerg-1260	463	6	splitting	splitting	NOUN
fuelectenerg-1260	463	7	method	method	NOUN
fuelectenerg-1260	463	8	for	for	ADP
fuelectenerg-1260	463	9	displaying	display	VERB
fuelectenerg-1260	463	10	turbulences	turbulence	NOUN
fuelectenerg-1260	463	11	in	in	ADP
fuelectenerg-1260	463	12	a	a	DET
fuelectenerg-1260	463	13	microchannel	microchannel	NOUN
fuelectenerg-1260	463	14	.	.	PUNCT
fuelectenerg-1260	464	1	our	our	PRON
fuelectenerg-1260	464	2	method	method	NOUN
fuelectenerg-1260	464	3	is	be	AUX
fuelectenerg-1260	464	4	suitable	suitable	ADJ
fuelectenerg-1260	464	5	for	for	ADP
fuelectenerg-1260	464	6	fast	fast	ADJ
fuelectenerg-1260	464	7	calculations	calculation	NOUN
fuelectenerg-1260	464	8	virtual	virtual	ADJ
fuelectenerg-1260	464	9	reality	reality	NOUN
fuelectenerg-1260	464	10	visualizations	visualization	NOUN
fuelectenerg-1260	464	11	in	in	ADP
fuelectenerg-1260	464	12	an	an	DET
fuelectenerg-1260	464	13	interactive	interactive	ADJ
fuelectenerg-1260	464	14	cad	cad	NOUN
fuelectenerg-1260	464	15	tool	tool	NOUN
fuelectenerg-1260	464	16	with	with	ADP
fuelectenerg-1260	464	17	a	a	DET
fuelectenerg-1260	464	18	2d	2d	NUM
fuelectenerg-1260	464	19	display	display	NOUN
fuelectenerg-1260	464	20	.	.	PUNCT
fuelectenerg-1260	465	1	instead	instead	ADV
fuelectenerg-1260	465	2	of	of	ADP
fuelectenerg-1260	465	3	calculating	calculate	VERB
fuelectenerg-1260	465	4	and	and	CCONJ
fuelectenerg-1260	465	5	recalculating	recalculate	VERB
fuelectenerg-1260	465	6	all	all	DET
fuelectenerg-1260	465	7	the	the	DET
fuelectenerg-1260	465	8	nodes	node	NOUN
fuelectenerg-1260	465	9	in	in	ADP
fuelectenerg-1260	465	10	a	a	DET
fuelectenerg-1260	465	11	mesh	mesh	NOUN
fuelectenerg-1260	465	12	as	as	ADP
fuelectenerg-1260	465	13	in	in	ADP
fuelectenerg-1260	465	14	finite	finite	ADJ
fuelectenerg-1260	465	15	elements	element	NOUN
fuelectenerg-1260	465	16	,	,	PUNCT
fuelectenerg-1260	465	17	our	our	PRON
fuelectenerg-1260	465	18	method	method	NOUN
fuelectenerg-1260	465	19	takes	take	VERB
fuelectenerg-1260	465	20	advantage	advantage	NOUN
fuelectenerg-1260	465	21	of	of	ADP
fuelectenerg-1260	465	22	redundancies	redundancy	NOUN
fuelectenerg-1260	465	23	.	.	PUNCT
fuelectenerg-1260	466	1	for	for	ADP
fuelectenerg-1260	466	2	graphic	graphic	ADJ
fuelectenerg-1260	466	3	visualizations	visualization	NOUN
fuelectenerg-1260	466	4	,	,	PUNCT
fuelectenerg-1260	466	5	we	we	PRON
fuelectenerg-1260	466	6	do	do	AUX
fuelectenerg-1260	466	7	not	not	PART
fuelectenerg-1260	466	8	necessarily	necessarily	ADV
fuelectenerg-1260	466	9	have	have	VERB
fuelectenerg-1260	466	10	to	to	PART
fuelectenerg-1260	466	11	go	go	VERB
fuelectenerg-1260	466	12	down	down	ADP
fuelectenerg-1260	466	13	to	to	ADP
fuelectenerg-1260	466	14	the	the	DET
fuelectenerg-1260	466	15	level	level	NOUN
fuelectenerg-1260	466	16	of	of	ADP
fuelectenerg-1260	466	17	atoms	atom	NOUN
fuelectenerg-1260	466	18	or	or	CCONJ
fuelectenerg-1260	466	19	molecules	molecule	NOUN
fuelectenerg-1260	466	20	.	.	PUNCT
fuelectenerg-1260	467	1	our	our	PRON
fuelectenerg-1260	467	2	objects	object	NOUN
fuelectenerg-1260	467	3	of	of	ADP
fuelectenerg-1260	467	4	interest	interest	NOUN
fuelectenerg-1260	467	5	can	can	AUX
fuelectenerg-1260	467	6	be	be	AUX
fuelectenerg-1260	467	7	composed	compose	VERB
fuelectenerg-1260	467	8	of	of	ADP
fuelectenerg-1260	467	9	macroscopic	macroscopic	ADJ
fuelectenerg-1260	467	10	particles	particle	NOUN
fuelectenerg-1260	467	11	or	or	CCONJ
fuelectenerg-1260	467	12	clusters	cluster	NOUN
fuelectenerg-1260	467	13	,	,	PUNCT
fuelectenerg-1260	467	14	but	but	CCONJ
fuelectenerg-1260	467	15	interacting	interact	VERB
fuelectenerg-1260	467	16	in	in	ADP
fuelectenerg-1260	467	17	similar	similar	ADJ
fuelectenerg-1260	467	18	ways	way	NOUN
fuelectenerg-1260	467	19	like	like	ADP
fuelectenerg-1260	467	20	smaller	small	ADJ
fuelectenerg-1260	467	21	particles	particle	NOUN
fuelectenerg-1260	467	22	.	.	PUNCT
fuelectenerg-1260	468	1	however	however	ADV
fuelectenerg-1260	468	2	,	,	PUNCT
fuelectenerg-1260	468	3	by	by	ADP
fuelectenerg-1260	468	4	staying	stay	VERB
fuelectenerg-1260	468	5	in	in	ADP
fuelectenerg-1260	468	6	the	the	DET
fuelectenerg-1260	468	7	potential	potential	ADJ
fuelectenerg-1260	468	8	domain	domain	NOUN
fuelectenerg-1260	468	9	instead	instead	ADV
fuelectenerg-1260	468	10	of	of	ADP
fuelectenerg-1260	468	11	the	the	DET
fuelectenerg-1260	468	12	force	force	NOUN
fuelectenerg-1260	468	13	domain	domain	NOUN
fuelectenerg-1260	468	14	,	,	PUNCT
fuelectenerg-1260	468	15	physical	physical	ADJ
fuelectenerg-1260	468	16	approximations	approximation	NOUN
fuelectenerg-1260	468	17	can	can	AUX
fuelectenerg-1260	468	18	be	be	AUX
fuelectenerg-1260	468	19	made	make	VERB
fuelectenerg-1260	468	20	,	,	PUNCT
fuelectenerg-1260	468	21	simplifying	simplify	VERB
fuelectenerg-1260	468	22	complex	complex	ADJ
fuelectenerg-1260	468	23	and	and	CCONJ
fuelectenerg-1260	468	24	lengthy	lengthy	ADJ
fuelectenerg-1260	468	25	calculations	calculation	NOUN
fuelectenerg-1260	468	26	.	.	PUNCT
fuelectenerg-1260	469	1	we	we	PRON
fuelectenerg-1260	469	2	use	use	VERB
fuelectenerg-1260	469	3	the	the	DET
fuelectenerg-1260	469	4	lennart	lennart	PROPN
fuelectenerg-1260	469	5	-	-	PUNCT
fuelectenerg-1260	469	6	jones	jones	PROPN
fuelectenerg-1260	469	7	potential	potential	ADJ
fuelectenerg-1260	469	8	model	model	NOUN
fuelectenerg-1260	469	9	,	,	PUNCT
fuelectenerg-1260	469	10	but	but	CCONJ
fuelectenerg-1260	469	11	instead	instead	ADV
fuelectenerg-1260	469	12	of	of	ADP
fuelectenerg-1260	469	13	individual	individual	ADJ
fuelectenerg-1260	469	14	particles	particle	NOUN
fuelectenerg-1260	469	15	,	,	PUNCT
fuelectenerg-1260	469	16	we	we	PRON
fuelectenerg-1260	469	17	use	use	VERB
fuelectenerg-1260	469	18	clusters	cluster	NOUN
fuelectenerg-1260	469	19	of	of	ADP
fuelectenerg-1260	469	20	particles	particle	NOUN
fuelectenerg-1260	469	21	[	[	X
fuelectenerg-1260	469	22	80	80	NUM
fuelectenerg-1260	469	23	]	]	PUNCT
fuelectenerg-1260	469	24	.	.	PUNCT
fuelectenerg-1260	470	1	we	we	PRON
fuelectenerg-1260	470	2	start	start	VERB
fuelectenerg-1260	470	3	when	when	SCONJ
fuelectenerg-1260	470	4	the	the	DET
fuelectenerg-1260	470	5	fluid	fluid	NOUN
fuelectenerg-1260	470	6	is	be	AUX
fuelectenerg-1260	470	7	pumped	pump	VERB
fuelectenerg-1260	470	8	with	with	ADP
fuelectenerg-1260	470	9	a	a	DET
fuelectenerg-1260	470	10	given	give	VERB
fuelectenerg-1260	470	11	force	force	NOUN
fuelectenerg-1260	470	12	into	into	ADP
fuelectenerg-1260	470	13	a	a	DET
fuelectenerg-1260	470	14	nozzle	nozzle	NOUN
fuelectenerg-1260	470	15	and	and	CCONJ
fuelectenerg-1260	470	16	the	the	DET
fuelectenerg-1260	470	17	microchannel	microchannel	NOUN
fuelectenerg-1260	470	18	at	at	ADP
fuelectenerg-1260	470	19	(	(	PUNCT
fuelectenerg-1260	470	20	t0	t0	NOUN
fuelectenerg-1260	470	21	)	)	PUNCT
fuelectenerg-1260	470	22	with	with	ADP
fuelectenerg-1260	470	23	larger	large	ADJ
fuelectenerg-1260	470	24	clusters	cluster	NOUN
fuelectenerg-1260	470	25	of	of	ADP
fuelectenerg-1260	470	26	particles	particle	NOUN
fuelectenerg-1260	470	27	(	(	PUNCT
fuelectenerg-1260	470	28	think	think	NOUN
fuelectenerg-1260	470	29	of	of	ADP
fuelectenerg-1260	470	30	circular	circular	ADJ
fuelectenerg-1260	470	31	droplets	droplet	NOUN
fuelectenerg-1260	470	32	)	)	PUNCT
fuelectenerg-1260	470	33	that	that	PRON
fuelectenerg-1260	470	34	are	be	AUX
fuelectenerg-1260	470	35	moving	move	VERB
fuelectenerg-1260	470	36	with	with	ADP
fuelectenerg-1260	470	37	equal	equal	ADJ
fuelectenerg-1260	470	38	speed	speed	NOUN
fuelectenerg-1260	470	39	and	and	CCONJ
fuelectenerg-1260	470	40	direction	direction	NOUN
fuelectenerg-1260	470	41	in	in	ADP
fuelectenerg-1260	470	42	the	the	DET
fuelectenerg-1260	470	43	stream	stream	NOUN
fuelectenerg-1260	470	44	pumped	pump	VERB
fuelectenerg-1260	470	45	through	through	ADP
fuelectenerg-1260	470	46	the	the	DET
fuelectenerg-1260	470	47	channel	channel	NOUN
fuelectenerg-1260	470	48	.	.	PUNCT
fuelectenerg-1260	471	1	after	after	ADP
fuelectenerg-1260	471	2	a	a	DET
fuelectenerg-1260	471	3	time	time	NOUN
fuelectenerg-1260	471	4	(	(	PUNCT
fuelectenerg-1260	471	5	t1	t1	NOUN
fuelectenerg-1260	471	6	)	)	PUNCT
fuelectenerg-1260	471	7	we	we	PRON
fuelectenerg-1260	471	8	divide	divide	VERB
fuelectenerg-1260	471	9	each	each	DET
fuelectenerg-1260	471	10	cluster	cluster	NOUN
fuelectenerg-1260	471	11	in	in	ADP
fuelectenerg-1260	471	12	half	half	NOUN
fuelectenerg-1260	471	13	(	(	PUNCT
fuelectenerg-1260	471	14	t2	t2	NOUN
fuelectenerg-1260	471	15	)	)	PUNCT
fuelectenerg-1260	471	16	,	,	PUNCT
fuelectenerg-1260	471	17	calculate	calculate	NOUN
fuelectenerg-1260	471	18	,	,	PUNCT
fuelectenerg-1260	471	19	divide	divide	VERB
fuelectenerg-1260	471	20	again	again	ADV
fuelectenerg-1260	471	21	(	(	PUNCT
fuelectenerg-1260	471	22	t3	t3	PROPN
fuelectenerg-1260	471	23	)	)	PUNCT
fuelectenerg-1260	471	24	and	and	CCONJ
fuelectenerg-1260	471	25	so	so	ADV
fuelectenerg-1260	471	26	on	on	ADP
fuelectenerg-1260	471	27	[	[	X
fuelectenerg-1260	471	28	81	81	NUM
fuelectenerg-1260	471	29	]	]	PUNCT
fuelectenerg-1260	471	30	.	.	PUNCT
fuelectenerg-1260	472	1	the	the	DET
fuelectenerg-1260	472	2	total	total	ADJ
fuelectenerg-1260	472	3	time	time	NOUN
fuelectenerg-1260	472	4	is	be	AUX
fuelectenerg-1260	472	5	the	the	DET
fuelectenerg-1260	472	6	sum	sum	NOUN
fuelectenerg-1260	472	7	of	of	ADP
fuelectenerg-1260	472	8	fig	fig	NOUN
fuelectenerg-1260	472	9	.	.	PUNCT
fuelectenerg-1260	473	1	4	4	NUM
fuelectenerg-1260	473	2	cluster	cluster	NOUN
fuelectenerg-1260	473	3	splitting	splitting	NOUN
fuelectenerg-1260	473	4	[	[	X
fuelectenerg-1260	473	5	81	81	NUM
fuelectenerg-1260	473	6	]	]	PUNCT
fuelectenerg-1260	473	7	upper	upper	ADJ
fuelectenerg-1260	473	8	:	:	PUNCT
fuelectenerg-1260	473	9	model	model	NOUN
fuelectenerg-1260	473	10	diagram	diagram	PROPN
fuelectenerg-1260	473	11	(	(	PUNCT
fuelectenerg-1260	473	12	1:2	1:2	NUM
fuelectenerg-1260	473	13	split	split	NOUN
fuelectenerg-1260	473	14	)	)	PUNCT
fuelectenerg-1260	473	15	lower	low	ADJ
fuelectenerg-1260	473	16	:	:	PUNCT
fuelectenerg-1260	473	17	simulation	simulation	NOUN
fuelectenerg-1260	473	18	(	(	PUNCT
fuelectenerg-1260	473	19	1:4	1:4	NUM
fuelectenerg-1260	473	20	split	split	NOUN
fuelectenerg-1260	473	21	)	)	PUNCT
fuelectenerg-1260	473	22	.	.	PUNCT
fuelectenerg-1260	474	1	mems	mem	NOUN
fuelectenerg-1260	474	2	design	design	NOUN
fuelectenerg-1260	474	3	simplification	simplification	NOUN
fuelectenerg-1260	474	4	with	with	ADP
fuelectenerg-1260	474	5	virtual	virtual	ADJ
fuelectenerg-1260	474	6	prototyping	prototype	VERB
fuelectenerg-1260	474	7	27	27	NUM
fuelectenerg-1260	474	8	a	a	DET
fuelectenerg-1260	474	9	well	well	ADV
fuelectenerg-1260	474	10	-	-	PUNCT
fuelectenerg-1260	474	11	known	know	VERB
fuelectenerg-1260	474	12	geometric	geometric	ADJ
fuelectenerg-1260	474	13	progression	progression	NOUN
fuelectenerg-1260	474	14	.	.	PUNCT
fuelectenerg-1260	475	1	ideally	ideally	ADV
fuelectenerg-1260	475	2	,	,	PUNCT
fuelectenerg-1260	475	3	by	by	ADP
fuelectenerg-1260	475	4	just	just	ADV
fuelectenerg-1260	475	5	dividing	divide	VERB
fuelectenerg-1260	475	6	each	each	DET
fuelectenerg-1260	475	7	cluster	cluster	NOUN
fuelectenerg-1260	475	8	into	into	ADP
fuelectenerg-1260	475	9	two	two	NUM
fuelectenerg-1260	475	10	we	we	PRON
fuelectenerg-1260	475	11	save	save	VERB
fuelectenerg-1260	475	12	50	50	NUM
fuelectenerg-1260	475	13	%	%	NOUN
fuelectenerg-1260	475	14	of	of	ADP
fuelectenerg-1260	475	15	calculations	calculation	NOUN
fuelectenerg-1260	475	16	.	.	PUNCT
fuelectenerg-1260	476	1	in	in	ADP
fuelectenerg-1260	476	2	reality	reality	NOUN
fuelectenerg-1260	476	3	it	it	PRON
fuelectenerg-1260	476	4	takes	take	VERB
fuelectenerg-1260	476	5	slightly	slightly	ADV
fuelectenerg-1260	476	6	more	more	ADJ
fuelectenerg-1260	476	7	because	because	SCONJ
fuelectenerg-1260	476	8	the	the	DET
fuelectenerg-1260	476	9	calculation	calculation	NOUN
fuelectenerg-1260	476	10	times	time	NOUN
fuelectenerg-1260	476	11	have	have	VERB
fuelectenerg-1260	476	12	to	to	PART
fuelectenerg-1260	476	13	be	be	AUX
fuelectenerg-1260	476	14	added	add	VERB
fuelectenerg-1260	476	15	in	in	ADP
fuelectenerg-1260	476	16	both	both	DET
fuelectenerg-1260	476	17	cases	case	NOUN
fuelectenerg-1260	476	18	,	,	PUNCT
fuelectenerg-1260	476	19	cluster	cluster	NOUN
fuelectenerg-1260	476	20	splitting	splitting	NOUN
fuelectenerg-1260	476	21	and	and	CCONJ
fuelectenerg-1260	476	22	fea	fea	NOUN
fuelectenerg-1260	477	1	[	[	X
fuelectenerg-1260	477	2	82	82	NUM
fuelectenerg-1260	477	3	]	]	X
fuelectenerg-1260	477	4	for	for	ADP
fuelectenerg-1260	477	5	comparison	comparison	NOUN
fuelectenerg-1260	477	6	.	.	PUNCT
fuelectenerg-1260	478	1	in	in	ADP
fuelectenerg-1260	478	2	this	this	DET
fuelectenerg-1260	478	3	method	method	NOUN
fuelectenerg-1260	478	4	,	,	PUNCT
fuelectenerg-1260	478	5	calibration	calibration	NOUN
fuelectenerg-1260	478	6	is	be	AUX
fuelectenerg-1260	478	7	required	require	VERB
fuelectenerg-1260	478	8	for	for	ADP
fuelectenerg-1260	478	9	different	different	ADJ
fuelectenerg-1260	478	10	materials	material	NOUN
fuelectenerg-1260	478	11	;	;	PUNCT
fuelectenerg-1260	478	12	this	this	PRON
fuelectenerg-1260	478	13	becomes	become	VERB
fuelectenerg-1260	478	14	part	part	NOUN
fuelectenerg-1260	478	15	of	of	ADP
fuelectenerg-1260	478	16	the	the	DET
fuelectenerg-1260	478	17	data	datum	NOUN
fuelectenerg-1260	478	18	library	library	NOUN
fuelectenerg-1260	478	19	.	.	PUNCT
fuelectenerg-1260	479	1	for	for	ADP
fuelectenerg-1260	479	2	the	the	DET
fuelectenerg-1260	479	3	example	example	NOUN
fuelectenerg-1260	479	4	shown	show	VERB
fuelectenerg-1260	479	5	in	in	ADP
fuelectenerg-1260	479	6	figure	figure	NOUN
fuelectenerg-1260	479	7	4	4	NUM
fuelectenerg-1260	479	8	,	,	PUNCT
fuelectenerg-1260	479	9	we	we	PRON
fuelectenerg-1260	479	10	used	use	VERB
fuelectenerg-1260	479	11	three	three	NUM
fuelectenerg-1260	479	12	layers	layer	NOUN
fuelectenerg-1260	479	13	and	and	CCONJ
fuelectenerg-1260	479	14	progressively	progressively	ADV
fuelectenerg-1260	479	15	reached	reach	VERB
fuelectenerg-1260	479	16	finer	fine	ADJ
fuelectenerg-1260	479	17	cluster	cluster	NOUN
fuelectenerg-1260	479	18	granularities	granularity	NOUN
fuelectenerg-1260	479	19	that	that	PRON
fuelectenerg-1260	479	20	are	be	AUX
fuelectenerg-1260	479	21	well	well	ADV
fuelectenerg-1260	479	22	suited	suited	ADJ
fuelectenerg-1260	479	23	to	to	PART
fuelectenerg-1260	479	24	show	show	VERB
fuelectenerg-1260	479	25	the	the	DET
fuelectenerg-1260	479	26	bullet	bullet	NOUN
fuelectenerg-1260	479	27	nosed	nose	VERB
fuelectenerg-1260	479	28	fluid	fluid	ADJ
fuelectenerg-1260	479	29	flow	flow	NOUN
fuelectenerg-1260	479	30	in	in	ADP
fuelectenerg-1260	479	31	the	the	DET
fuelectenerg-1260	479	32	channel	channel	NOUN
fuelectenerg-1260	479	33	.	.	PUNCT
fuelectenerg-1260	480	1	our	our	PRON
fuelectenerg-1260	480	2	calculation	calculation	NOUN
fuelectenerg-1260	480	3	of	of	ADP
fuelectenerg-1260	480	4	the	the	DET
fuelectenerg-1260	480	5	channel	channel	NOUN
fuelectenerg-1260	480	6	used	use	VERB
fuelectenerg-1260	480	7	6000	6000	NUM
fuelectenerg-1260	480	8	clusters	cluster	NOUN
fuelectenerg-1260	480	9	in	in	ADP
fuelectenerg-1260	480	10	our	our	PRON
fuelectenerg-1260	480	11	worst	bad	ADJ
fuelectenerg-1260	480	12	-	-	PUNCT
fuelectenerg-1260	480	13	case	case	NOUN
fuelectenerg-1260	480	14	dynamic	dynamic	ADJ
fuelectenerg-1260	480	15	simulation	simulation	NOUN
fuelectenerg-1260	480	16	examples	example	NOUN
fuelectenerg-1260	480	17	.	.	PUNCT
fuelectenerg-1260	481	1	the	the	DET
fuelectenerg-1260	481	2	corresponding	correspond	VERB
fuelectenerg-1260	481	3	fea	fea	PROPN
fuelectenerg-1260	481	4	calculations	calculation	NOUN
fuelectenerg-1260	481	5	used	use	VERB
fuelectenerg-1260	481	6	90000	90000	NUM
fuelectenerg-1260	481	7	nodes	node	NOUN
fuelectenerg-1260	481	8	for	for	ADP
fuelectenerg-1260	481	9	a	a	DET
fuelectenerg-1260	481	10	static	static	ADJ
fuelectenerg-1260	481	11	image	image	NOUN
fuelectenerg-1260	481	12	.	.	PUNCT
fuelectenerg-1260	482	1	6.4	6.4	NUM
fuelectenerg-1260	482	2	.	.	PUNCT
fuelectenerg-1260	482	3	flexing	flex	VERB
fuelectenerg-1260	482	4	movements	movement	NOUN
fuelectenerg-1260	482	5	.	.	PUNCT
fuelectenerg-1260	483	1	another	another	DET
fuelectenerg-1260	483	2	research	research	NOUN
fuelectenerg-1260	483	3	aimed	aim	VERB
fuelectenerg-1260	483	4	at	at	ADP
fuelectenerg-1260	483	5	developing	develop	VERB
fuelectenerg-1260	483	6	faster	fast	ADJ
fuelectenerg-1260	483	7	models	model	NOUN
fuelectenerg-1260	483	8	for	for	ADP
fuelectenerg-1260	483	9	magda	magda	PROPN
fuelectenerg-1260	483	10	were	be	AUX
fuelectenerg-1260	483	11	flexing	flex	VERB
fuelectenerg-1260	483	12	membranes	membrane	NOUN
fuelectenerg-1260	483	13	and	and	CCONJ
fuelectenerg-1260	483	14	cantilevers	cantilever	NOUN
fuelectenerg-1260	483	15	.	.	PUNCT
fuelectenerg-1260	484	1	normally	normally	ADV
fuelectenerg-1260	484	2	these	these	DET
fuelectenerg-1260	484	3	components	component	NOUN
fuelectenerg-1260	484	4	are	be	AUX
fuelectenerg-1260	484	5	also	also	ADV
fuelectenerg-1260	484	6	calculated	calculate	VERB
fuelectenerg-1260	484	7	with	with	ADP
fuelectenerg-1260	484	8	finite	finite	ADJ
fuelectenerg-1260	484	9	elements	element	NOUN
fuelectenerg-1260	484	10	.	.	PUNCT
fuelectenerg-1260	485	1	we	we	PRON
fuelectenerg-1260	485	2	derived	derive	VERB
fuelectenerg-1260	485	3	faster	fast	ADJ
fuelectenerg-1260	485	4	models	model	NOUN
fuelectenerg-1260	485	5	using	use	VERB
fuelectenerg-1260	485	6	splines	spline	NOUN
fuelectenerg-1260	485	7	.	.	PUNCT
fuelectenerg-1260	486	1	our	our	PRON
fuelectenerg-1260	486	2	parameters	parameter	NOUN
fuelectenerg-1260	486	3	were	be	AUX
fuelectenerg-1260	486	4	material	material	ADJ
fuelectenerg-1260	486	5	,	,	PUNCT
fuelectenerg-1260	486	6	thickness	thickness	NOUN
fuelectenerg-1260	486	7	of	of	ADP
fuelectenerg-1260	486	8	membrane	membrane	NOUN
fuelectenerg-1260	486	9	and	and	CCONJ
fuelectenerg-1260	486	10	size	size	NOUN
fuelectenerg-1260	486	11	(	(	PUNCT
fuelectenerg-1260	486	12	diameter	diameter	NOUN
fuelectenerg-1260	486	13	or	or	CCONJ
fuelectenerg-1260	486	14	length	length	NOUN
fuelectenerg-1260	486	15	of	of	ADP
fuelectenerg-1260	486	16	cantilever	cantilever	NOUN
fuelectenerg-1260	486	17	)	)	PUNCT
fuelectenerg-1260	486	18	.	.	PUNCT
fuelectenerg-1260	487	1	these	these	PRON
fuelectenerg-1260	487	2	were	be	AUX
fuelectenerg-1260	487	3	fed	feed	VERB
fuelectenerg-1260	487	4	into	into	ADP
fuelectenerg-1260	487	5	ansys	ansys	PROPN
fuelectenerg-1260	487	6	and	and	CCONJ
fuelectenerg-1260	487	7	the	the	DET
fuelectenerg-1260	487	8	values	value	NOUN
fuelectenerg-1260	487	9	obtained	obtain	VERB
fuelectenerg-1260	487	10	were	be	AUX
fuelectenerg-1260	487	11	then	then	ADV
fuelectenerg-1260	487	12	imported	import	VERB
fuelectenerg-1260	487	13	into	into	ADP
fuelectenerg-1260	487	14	matlab	matlab	NOUN
fuelectenerg-1260	487	15	where	where	SCONJ
fuelectenerg-1260	487	16	splines	spline	NOUN
fuelectenerg-1260	487	17	and	and	CCONJ
fuelectenerg-1260	487	18	quadratic	quadratic	ADJ
fuelectenerg-1260	487	19	polynomials	polynomial	NOUN
fuelectenerg-1260	487	20	are	be	AUX
fuelectenerg-1260	487	21	fitted	fit	VERB
fuelectenerg-1260	487	22	to	to	ADP
fuelectenerg-1260	487	23	them	they	PRON
fuelectenerg-1260	487	24	.	.	PUNCT
fuelectenerg-1260	488	1	then	then	ADV
fuelectenerg-1260	488	2	the	the	DET
fuelectenerg-1260	488	3	equations	equation	NOUN
fuelectenerg-1260	488	4	describing	describe	VERB
fuelectenerg-1260	488	5	the	the	DET
fuelectenerg-1260	488	6	curves	curve	NOUN
fuelectenerg-1260	488	7	are	be	AUX
fuelectenerg-1260	488	8	obtained	obtain	VERB
fuelectenerg-1260	488	9	as	as	ADV
fuelectenerg-1260	488	10	well	well	ADV
fuelectenerg-1260	488	11	as	as	ADP
fuelectenerg-1260	488	12	the	the	DET
fuelectenerg-1260	488	13	coefficients	coefficient	NOUN
fuelectenerg-1260	488	14	and	and	CCONJ
fuelectenerg-1260	488	15	errors	error	NOUN
fuelectenerg-1260	488	16	of	of	ADP
fuelectenerg-1260	488	17	the	the	DET
fuelectenerg-1260	488	18	structures	structure	NOUN
fuelectenerg-1260	488	19	.	.	PUNCT
fuelectenerg-1260	489	1	the	the	DET
fuelectenerg-1260	489	2	process	process	NOUN
fuelectenerg-1260	489	3	involves	involve	VERB
fuelectenerg-1260	489	4	dividing	divide	VERB
fuelectenerg-1260	489	5	the	the	DET
fuelectenerg-1260	489	6	surface	surface	NOUN
fuelectenerg-1260	489	7	into	into	ADP
fuelectenerg-1260	489	8	three	three	NUM
fuelectenerg-1260	489	9	regions	region	NOUN
fuelectenerg-1260	489	10	or	or	CCONJ
fuelectenerg-1260	489	11	segments	segment	NOUN
fuelectenerg-1260	489	12	of	of	ADP
fuelectenerg-1260	489	13	curvature	curvature	NOUN
fuelectenerg-1260	489	14	.	.	PUNCT
fuelectenerg-1260	490	1	figure	figure	NOUN
fuelectenerg-1260	490	2	5	5	NUM
fuelectenerg-1260	490	3	shows	show	VERB
fuelectenerg-1260	490	4	the	the	DET
fuelectenerg-1260	490	5	difference	difference	NOUN
fuelectenerg-1260	490	6	between	between	ADP
fuelectenerg-1260	490	7	the	the	DET
fuelectenerg-1260	490	8	real	real	ADJ
fuelectenerg-1260	490	9	flexed	flexed	ADJ
fuelectenerg-1260	490	10	membrane	membrane	NOUN
fuelectenerg-1260	490	11	and	and	CCONJ
fuelectenerg-1260	490	12	the	the	DET
fuelectenerg-1260	490	13	calculated	calculated	ADJ
fuelectenerg-1260	490	14	values	value	NOUN
fuelectenerg-1260	490	15	at	at	ADP
fuelectenerg-1260	490	16	maximum	maximum	ADJ
fuelectenerg-1260	490	17	deformation	deformation	NOUN
fuelectenerg-1260	490	18	.	.	PUNCT
fuelectenerg-1260	491	1	the	the	DET
fuelectenerg-1260	491	2	obtained	obtain	VERB
fuelectenerg-1260	491	3	errors	error	NOUN
fuelectenerg-1260	491	4	are	be	AUX
fuelectenerg-1260	491	5	still	still	ADV
fuelectenerg-1260	491	6	within	within	ADP
fuelectenerg-1260	491	7	the	the	DET
fuelectenerg-1260	491	8	errors	error	NOUN
fuelectenerg-1260	491	9	of	of	ADP
fuelectenerg-1260	491	10	ansys	ansys	PROPN
fuelectenerg-1260	491	11	.	.	PUNCT
fuelectenerg-1260	492	1	for	for	ADP
fuelectenerg-1260	492	2	the	the	DET
fuelectenerg-1260	492	3	purpose	purpose	NOUN
fuelectenerg-1260	492	4	of	of	ADP
fuelectenerg-1260	492	5	magda	magda	PROPN
fuelectenerg-1260	492	6	our	our	PRON
fuelectenerg-1260	492	7	models	model	NOUN
fuelectenerg-1260	492	8	can	can	AUX
fuelectenerg-1260	492	9	be	be	AUX
fuelectenerg-1260	492	10	repeated	repeat	VERB
fuelectenerg-1260	492	11	by	by	ADP
fuelectenerg-1260	492	12	systematical	systematical	ADJ
fuelectenerg-1260	492	13	stepped	step	VERB
fuelectenerg-1260	492	14	analysis	analysis	NOUN
fuelectenerg-1260	492	15	and	and	CCONJ
fuelectenerg-1260	492	16	then	then	ADV
fuelectenerg-1260	492	17	bundled	bundle	VERB
fuelectenerg-1260	492	18	and	and	CCONJ
fuelectenerg-1260	492	19	simplified	simplify	VERB
fuelectenerg-1260	492	20	into	into	ADP
fuelectenerg-1260	492	21	a	a	DET
fuelectenerg-1260	492	22	more	more	ADV
fuelectenerg-1260	492	23	generic	generic	ADJ
fuelectenerg-1260	492	24	model	model	NOUN
fuelectenerg-1260	492	25	with	with	ADP
fuelectenerg-1260	492	26	simple	simple	ADJ
fuelectenerg-1260	492	27	parameter	parameter	NOUN
fuelectenerg-1260	492	28	input	input	NOUN
fuelectenerg-1260	493	1	[	[	X
fuelectenerg-1260	493	2	83	83	NUM
fuelectenerg-1260	493	3	]	]	PUNCT
fuelectenerg-1260	493	4	.	.	PUNCT
fuelectenerg-1260	494	1	fig	fig	NOUN
fuelectenerg-1260	494	2	.	.	PUNCT
fuelectenerg-1260	495	1	5	5	NUM
fuelectenerg-1260	495	2	membrane	membrane	NOUN
fuelectenerg-1260	495	3	flexing	flexing	NOUN
fuelectenerg-1260	495	4	modelled	model	VERB
fuelectenerg-1260	495	5	as	as	ADP
fuelectenerg-1260	495	6	three	three	NUM
fuelectenerg-1260	495	7	different	different	ADJ
fuelectenerg-1260	495	8	segments	segment	NOUN
fuelectenerg-1260	495	9	and	and	CCONJ
fuelectenerg-1260	495	10	using	use	VERB
fuelectenerg-1260	495	11	spline	spline	NOUN
fuelectenerg-1260	495	12	approximations	approximation	NOUN
fuelectenerg-1260	495	13	(	(	PUNCT
fuelectenerg-1260	495	14	red	red	ADJ
fuelectenerg-1260	495	15	:	:	PUNCT
fuelectenerg-1260	495	16	actual	actual	ADJ
fuelectenerg-1260	495	17	,	,	PUNCT
fuelectenerg-1260	495	18	blue	blue	ADJ
fuelectenerg-1260	495	19	simulated	simulated	ADJ
fuelectenerg-1260	495	20	)	)	PUNCT
fuelectenerg-1260	495	21	.	.	PUNCT
fuelectenerg-1260	496	1	6.5	6.5	NUM
fuelectenerg-1260	496	2	.	.	PUNCT
fuelectenerg-1260	496	3	virtual	virtual	ADJ
fuelectenerg-1260	496	4	etching	etch	VERB
fuelectenerg-1260	496	5	again	again	ADV
fuelectenerg-1260	496	6	,	,	PUNCT
fuelectenerg-1260	496	7	after	after	ADP
fuelectenerg-1260	496	8	an	an	DET
fuelectenerg-1260	496	9	in	in	ADP
fuelectenerg-1260	496	10	-	-	PUNCT
fuelectenerg-1260	496	11	depth	depth	NOUN
fuelectenerg-1260	496	12	comparison	comparison	NOUN
fuelectenerg-1260	496	13	of	of	ADP
fuelectenerg-1260	496	14	available	available	ADJ
fuelectenerg-1260	496	15	software	software	NOUN
fuelectenerg-1260	496	16	techniques	technique	NOUN
fuelectenerg-1260	496	17	,	,	PUNCT
fuelectenerg-1260	496	18	we	we	PRON
fuelectenerg-1260	496	19	found	find	VERB
fuelectenerg-1260	496	20	that	that	SCONJ
fuelectenerg-1260	496	21	the	the	DET
fuelectenerg-1260	496	22	main	main	ADJ
fuelectenerg-1260	496	23	problem	problem	NOUN
fuelectenerg-1260	496	24	is	be	AUX
fuelectenerg-1260	496	25	that	that	SCONJ
fuelectenerg-1260	496	26	they	they	PRON
fuelectenerg-1260	496	27	use	use	VERB
fuelectenerg-1260	496	28	finite	finite	ADJ
fuelectenerg-1260	496	29	elements	element	NOUN
fuelectenerg-1260	496	30	to	to	PART
fuelectenerg-1260	496	31	calculate	calculate	VERB
fuelectenerg-1260	496	32	material	material	NOUN
fuelectenerg-1260	496	33	removal	removal	NOUN
fuelectenerg-1260	496	34	.	.	PUNCT
fuelectenerg-1260	497	1	again	again	ADV
fuelectenerg-1260	497	2	,	,	PUNCT
fuelectenerg-1260	497	3	28	28	PROPN
fuelectenerg-1260	497	4	r.	r.	PROPN
fuelectenerg-1260	497	5	sitte	sitte	PROPN
fuelectenerg-1260	497	6	this	this	PRON
fuelectenerg-1260	497	7	is	be	AUX
fuelectenerg-1260	497	8	not	not	PART
fuelectenerg-1260	497	9	suitable	suitable	ADJ
fuelectenerg-1260	497	10	for	for	ADP
fuelectenerg-1260	497	11	interactive	interactive	ADJ
fuelectenerg-1260	497	12	vp	vp	NOUN
fuelectenerg-1260	497	13	because	because	SCONJ
fuelectenerg-1260	497	14	at	at	ADP
fuelectenerg-1260	497	15	current	current	PROPN
fuelectenerg-1260	497	16	hw	hw	PROPN
fuelectenerg-1260	497	17	status	status	NOUN
fuelectenerg-1260	497	18	this	this	PRON
fuelectenerg-1260	497	19	is	be	AUX
fuelectenerg-1260	497	20	still	still	ADV
fuelectenerg-1260	497	21	too	too	ADV
fuelectenerg-1260	497	22	slow	slow	ADJ
fuelectenerg-1260	497	23	.	.	PUNCT
fuelectenerg-1260	498	1	etching	etch	VERB
fuelectenerg-1260	498	2	performance	performance	NOUN
fuelectenerg-1260	498	3	is	be	AUX
fuelectenerg-1260	498	4	well	well	ADV
fuelectenerg-1260	498	5	known	know	VERB
fuelectenerg-1260	498	6	from	from	ADP
fuelectenerg-1260	498	7	the	the	DET
fuelectenerg-1260	498	8	integrated	integrate	VERB
fuelectenerg-1260	498	9	circuit	circuit	NOUN
fuelectenerg-1260	498	10	processing	processing	NOUN
fuelectenerg-1260	498	11	,	,	PUNCT
fuelectenerg-1260	498	12	but	but	CCONJ
fuelectenerg-1260	498	13	it	it	PRON
fuelectenerg-1260	498	14	is	be	AUX
fuelectenerg-1260	498	15	not	not	PART
fuelectenerg-1260	498	16	so	so	ADV
fuelectenerg-1260	498	17	predictable	predictable	ADJ
fuelectenerg-1260	498	18	in	in	ADP
fuelectenerg-1260	498	19	mems	mem	NOUN
fuelectenerg-1260	498	20	because	because	SCONJ
fuelectenerg-1260	498	21	the	the	DET
fuelectenerg-1260	498	22	shapes	shape	NOUN
fuelectenerg-1260	498	23	are	be	AUX
fuelectenerg-1260	498	24	more	more	ADV
fuelectenerg-1260	498	25	complex	complex	ADJ
fuelectenerg-1260	498	26	.	.	PUNCT
fuelectenerg-1260	499	1	underetching	underetching	NOUN
fuelectenerg-1260	499	2	is	be	AUX
fuelectenerg-1260	499	3	not	not	PART
fuelectenerg-1260	499	4	desired	desire	VERB
fuelectenerg-1260	499	5	in	in	ADP
fuelectenerg-1260	499	6	ic	ic	PROPN
fuelectenerg-1260	499	7	technology	technology	NOUN
fuelectenerg-1260	499	8	,	,	PUNCT
fuelectenerg-1260	499	9	but	but	CCONJ
fuelectenerg-1260	499	10	it	it	PRON
fuelectenerg-1260	499	11	is	be	AUX
fuelectenerg-1260	499	12	crucial	crucial	ADJ
fuelectenerg-1260	499	13	in	in	ADP
fuelectenerg-1260	499	14	shaping	shape	VERB
fuelectenerg-1260	499	15	and	and	CCONJ
fuelectenerg-1260	499	16	releasing	release	VERB
fuelectenerg-1260	499	17	mems	mems	ADJ
fuelectenerg-1260	499	18	structures	structure	NOUN
fuelectenerg-1260	499	19	for	for	ADP
fuelectenerg-1260	499	20	free	free	ADJ
fuelectenerg-1260	499	21	movement	movement	NOUN
fuelectenerg-1260	499	22	.	.	PUNCT
fuelectenerg-1260	500	1	the	the	DET
fuelectenerg-1260	500	2	preparations	preparation	NOUN
fuelectenerg-1260	500	3	for	for	ADP
fuelectenerg-1260	500	4	animated	animate	VERB
fuelectenerg-1260	500	5	anisotropic	anisotropic	NOUN
fuelectenerg-1260	500	6	etching	etch	VERB
fuelectenerg-1260	500	7	,	,	PUNCT
fuelectenerg-1260	500	8	both	both	CCONJ
fuelectenerg-1260	500	9	for	for	ADP
fuelectenerg-1260	500	10	wet	wet	ADJ
fuelectenerg-1260	500	11	and	and	CCONJ
fuelectenerg-1260	500	12	dry	dry	ADJ
fuelectenerg-1260	500	13	etching	etching	NOUN
fuelectenerg-1260	500	14	are	be	AUX
fuelectenerg-1260	500	15	relatively	relatively	ADV
fuelectenerg-1260	500	16	straight	straight	ADJ
fuelectenerg-1260	500	17	forward	forward	ADV
fuelectenerg-1260	500	18	,	,	PUNCT
fuelectenerg-1260	500	19	but	but	CCONJ
fuelectenerg-1260	500	20	isotropic	isotropic	ADJ
fuelectenerg-1260	500	21	etching	etching	NOUN
fuelectenerg-1260	500	22	requires	require	VERB
fuelectenerg-1260	500	23	a	a	DET
fuelectenerg-1260	500	24	more	more	ADV
fuelectenerg-1260	500	25	sophisticated	sophisticated	ADJ
fuelectenerg-1260	500	26	approach	approach	NOUN
fuelectenerg-1260	500	27	.	.	PUNCT
fuelectenerg-1260	501	1	fig	fig	NOUN
fuelectenerg-1260	501	2	.	.	PUNCT
fuelectenerg-1260	502	1	6a	6a	NOUN
fuelectenerg-1260	502	2	etching	etch	VERB
fuelectenerg-1260	502	3	square	square	ADJ
fuelectenerg-1260	502	4	mask	mask	NOUN
fuelectenerg-1260	502	5	wiremesh	wiremesh	NOUN
fuelectenerg-1260	502	6	obtained	obtain	VERB
fuelectenerg-1260	502	7	with	with	ADP
fuelectenerg-1260	502	8	marker	marker	NOUN
fuelectenerg-1260	502	9	string	string	NOUN
fuelectenerg-1260	502	10	method	method	NOUN
fuelectenerg-1260	502	11	,	,	PUNCT
fuelectenerg-1260	502	12	2d	2d	NUM
fuelectenerg-1260	502	13	view	view	NOUN
fuelectenerg-1260	502	14	[	[	X
fuelectenerg-1260	502	15	84	84	NUM
fuelectenerg-1260	502	16	]	]	PUNCT
fuelectenerg-1260	502	17	.	.	PUNCT
fuelectenerg-1260	503	1	fig	fig	NOUN
fuelectenerg-1260	503	2	.	.	PUNCT
fuelectenerg-1260	504	1	6b	6b	NOUN
fuelectenerg-1260	504	2	etching	etch	VERB
fuelectenerg-1260	504	3	square	square	ADJ
fuelectenerg-1260	504	4	mask	mask	NOUN
fuelectenerg-1260	504	5	wiremesh	wiremesh	NOUN
fuelectenerg-1260	504	6	obtained	obtain	VERB
fuelectenerg-1260	504	7	with	with	ADP
fuelectenerg-1260	504	8	marker	marker	NOUN
fuelectenerg-1260	504	9	string	string	NOUN
fuelectenerg-1260	504	10	method	method	NOUN
fuelectenerg-1260	504	11	,	,	PUNCT
fuelectenerg-1260	504	12	3d	3d	NUM
fuelectenerg-1260	504	13	view	view	NOUN
fuelectenerg-1260	504	14	[	[	X
fuelectenerg-1260	504	15	84	84	NUM
fuelectenerg-1260	504	16	]	]	PUNCT
fuelectenerg-1260	504	17	.	.	PUNCT
fuelectenerg-1260	505	1	fig	fig	NOUN
fuelectenerg-1260	505	2	.	.	PUNCT
fuelectenerg-1260	506	1	6c	6c	NOUN
fuelectenerg-1260	506	2	etching	etch	VERB
fuelectenerg-1260	506	3	square	square	ADJ
fuelectenerg-1260	506	4	mask	mask	NOUN
fuelectenerg-1260	506	5	(	(	PUNCT
fuelectenerg-1260	506	6	marker	marker	NOUN
fuelectenerg-1260	506	7	string	string	NOUN
fuelectenerg-1260	506	8	method	method	NOUN
fuelectenerg-1260	506	9	)	)	PUNCT
fuelectenerg-1260	506	10	rendered	render	VERB
fuelectenerg-1260	506	11	,	,	PUNCT
fuelectenerg-1260	506	12	2d	2d	NUM
fuelectenerg-1260	506	13	view	view	NOUN
fuelectenerg-1260	506	14	[	[	X
fuelectenerg-1260	506	15	84	84	NUM
fuelectenerg-1260	506	16	]	]	PUNCT
fuelectenerg-1260	506	17	.	.	PUNCT
fuelectenerg-1260	507	1	fig	fig	NOUN
fuelectenerg-1260	507	2	.	.	PUNCT
fuelectenerg-1260	508	1	6d	6d	NUM
fuelectenerg-1260	508	2	etching	etch	VERB
fuelectenerg-1260	508	3	round	round	NOUN
fuelectenerg-1260	508	4	mask	mask	NOUN
fuelectenerg-1260	508	5	(	(	PUNCT
fuelectenerg-1260	508	6	marker	marker	NOUN
fuelectenerg-1260	508	7	string	string	NOUN
fuelectenerg-1260	508	8	method	method	NOUN
fuelectenerg-1260	508	9	)	)	PUNCT
fuelectenerg-1260	508	10	rendered	render	VERB
fuelectenerg-1260	508	11	,	,	PUNCT
fuelectenerg-1260	508	12	3d	3d	NUM
fuelectenerg-1260	508	13	view	view	NOUN
fuelectenerg-1260	508	14	[	[	X
fuelectenerg-1260	508	15	84	84	NUM
fuelectenerg-1260	508	16	]	]	PUNCT
fuelectenerg-1260	508	17	.	.	PUNCT
fuelectenerg-1260	509	1	for	for	ADP
fuelectenerg-1260	509	2	visual	visual	ADJ
fuelectenerg-1260	509	3	simulations	simulation	NOUN
fuelectenerg-1260	509	4	of	of	ADP
fuelectenerg-1260	509	5	isotropic	isotropic	NOUN
fuelectenerg-1260	509	6	etching	etch	VERB
fuelectenerg-1260	509	7	we	we	PRON
fuelectenerg-1260	509	8	use	use	VERB
fuelectenerg-1260	509	9	a	a	DET
fuelectenerg-1260	509	10	marker	marker	NOUN
fuelectenerg-1260	509	11	/	/	SYM
fuelectenerg-1260	509	12	string	string	NOUN
fuelectenerg-1260	509	13	method	method	NOUN
fuelectenerg-1260	509	14	for	for	ADP
fuelectenerg-1260	509	15	the	the	DET
fuelectenerg-1260	509	16	progressive	progressive	ADJ
fuelectenerg-1260	509	17	mesh	mesh	NOUN
fuelectenerg-1260	509	18	as	as	ADP
fuelectenerg-1260	509	19	a	a	DET
fuelectenerg-1260	509	20	faster	fast	ADJ
fuelectenerg-1260	509	21	method	method	NOUN
fuelectenerg-1260	509	22	suitable	suitable	ADJ
fuelectenerg-1260	509	23	for	for	ADP
fuelectenerg-1260	509	24	interactive	interactive	ADJ
fuelectenerg-1260	509	25	design	design	NOUN
fuelectenerg-1260	509	26	[	[	X
fuelectenerg-1260	509	27	84	84	NUM
fuelectenerg-1260	509	28	]	]	PUNCT
fuelectenerg-1260	509	29	.	.	PUNCT
fuelectenerg-1260	510	1	the	the	DET
fuelectenerg-1260	510	2	method	method	NOUN
fuelectenerg-1260	510	3	is	be	AUX
fuelectenerg-1260	510	4	not	not	PART
fuelectenerg-1260	510	5	known	know	VERB
fuelectenerg-1260	510	6	much	much	ADV
fuelectenerg-1260	510	7	for	for	ADP
fuelectenerg-1260	510	8	etching	etch	VERB
fuelectenerg-1260	510	9	but	but	CCONJ
fuelectenerg-1260	510	10	has	have	AUX
fuelectenerg-1260	510	11	been	be	AUX
fuelectenerg-1260	510	12	proposed	propose	VERB
fuelectenerg-1260	510	13	for	for	ADP
fuelectenerg-1260	510	14	modelling	model	VERB
fuelectenerg-1260	510	15	other	other	ADJ
fuelectenerg-1260	510	16	ic	ic	PROPN
fuelectenerg-1260	510	17	processing	process	VERB
fuelectenerg-1260	510	18	[	[	X
fuelectenerg-1260	510	19	85	85	NUM
fuelectenerg-1260	510	20	]	]	PUNCT
fuelectenerg-1260	510	21	.	.	PUNCT
fuelectenerg-1260	511	1	the	the	DET
fuelectenerg-1260	511	2	model	model	NOUN
fuelectenerg-1260	511	3	never	never	ADV
fuelectenerg-1260	511	4	took	take	VERB
fuelectenerg-1260	511	5	off	off	ADP
fuelectenerg-1260	511	6	due	due	ADP
fuelectenerg-1260	511	7	to	to	ADP
fuelectenerg-1260	511	8	a	a	DET
fuelectenerg-1260	511	9	problem	problem	NOUN
fuelectenerg-1260	511	10	with	with	ADP
fuelectenerg-1260	511	11	swallowtail	swallowtail	ADJ
fuelectenerg-1260	511	12	conditions	condition	NOUN
fuelectenerg-1260	511	13	that	that	PRON
fuelectenerg-1260	511	14	appear	appear	VERB
fuelectenerg-1260	511	15	on	on	ADP
fuelectenerg-1260	511	16	corners	corner	NOUN
fuelectenerg-1260	511	17	.	.	PUNCT
fuelectenerg-1260	512	1	we	we	PRON
fuelectenerg-1260	512	2	have	have	AUX
fuelectenerg-1260	512	3	found	find	VERB
fuelectenerg-1260	512	4	a	a	DET
fuelectenerg-1260	512	5	way	way	NOUN
fuelectenerg-1260	512	6	for	for	ADP
fuelectenerg-1260	512	7	overcoming	overcome	VERB
fuelectenerg-1260	512	8	swallowtail	swallowtail	NOUN
fuelectenerg-1260	512	9	conditions	condition	NOUN
fuelectenerg-1260	512	10	and	and	CCONJ
fuelectenerg-1260	512	11	we	we	PRON
fuelectenerg-1260	512	12	are	be	AUX
fuelectenerg-1260	512	13	also	also	ADV
fuelectenerg-1260	512	14	able	able	ADJ
fuelectenerg-1260	512	15	to	to	PART
fuelectenerg-1260	512	16	simulate	simulate	VERB
fuelectenerg-1260	512	17	underetching	underetching	NOUN
fuelectenerg-1260	512	18	.	.	PUNCT
fuelectenerg-1260	513	1	fig	fig	NOUN
fuelectenerg-1260	513	2	.	.	PUNCT
fuelectenerg-1260	514	1	6a	6a	NOUN
fuelectenerg-1260	514	2	and	and	CCONJ
fuelectenerg-1260	514	3	6b	6b	NOUN
fuelectenerg-1260	514	4	show	show	VERB
fuelectenerg-1260	514	5	the	the	DET
fuelectenerg-1260	514	6	wire	wire	NOUN
fuelectenerg-1260	514	7	meshes	mesh	NOUN
fuelectenerg-1260	514	8	obtained	obtain	VERB
fuelectenerg-1260	514	9	in	in	ADP
fuelectenerg-1260	514	10	the	the	DET
fuelectenerg-1260	514	11	progress	progress	NOUN
fuelectenerg-1260	514	12	of	of	ADP
fuelectenerg-1260	514	13	etching	etch	VERB
fuelectenerg-1260	514	14	using	use	VERB
fuelectenerg-1260	514	15	a	a	DET
fuelectenerg-1260	514	16	square	square	ADJ
fuelectenerg-1260	514	17	lithography	lithography	NOUN
fuelectenerg-1260	514	18	mask	mask	NOUN
fuelectenerg-1260	514	19	calculated	calculate	VERB
fuelectenerg-1260	514	20	in	in	ADP
fuelectenerg-1260	514	21	2d	2d	NUM
fuelectenerg-1260	514	22	then	then	ADV
fuelectenerg-1260	514	23	rotated	rotate	VERB
fuelectenerg-1260	514	24	,	,	PUNCT
fuelectenerg-1260	514	25	and	and	CCONJ
fuelectenerg-1260	514	26	a	a	DET
fuelectenerg-1260	514	27	square	square	ADJ
fuelectenerg-1260	514	28	mask	mask	NOUN
fuelectenerg-1260	514	29	calculated	calculate	VERB
fuelectenerg-1260	514	30	in	in	ADP
fuelectenerg-1260	514	31	3d	3d	NUM
fuelectenerg-1260	514	32	respectively	respectively	ADV
fuelectenerg-1260	514	33	.	.	PUNCT
fuelectenerg-1260	515	1	the	the	DET
fuelectenerg-1260	515	2	method	method	NOUN
fuelectenerg-1260	515	3	can	can	AUX
fuelectenerg-1260	515	4	be	be	AUX
fuelectenerg-1260	515	5	extended	extend	VERB
fuelectenerg-1260	515	6	into	into	ADP
fuelectenerg-1260	515	7	larger	large	ADJ
fuelectenerg-1260	515	8	material	material	NOUN
fuelectenerg-1260	515	9	removal	removal	NOUN
fuelectenerg-1260	515	10	cad	cad	NOUN
fuelectenerg-1260	515	11	visualizations	visualization	NOUN
fuelectenerg-1260	515	12	.	.	PUNCT
fuelectenerg-1260	516	1	this	this	PRON
fuelectenerg-1260	516	2	is	be	AUX
fuelectenerg-1260	516	3	a	a	DET
fuelectenerg-1260	516	4	crucial	crucial	ADJ
fuelectenerg-1260	516	5	step	step	NOUN
fuelectenerg-1260	516	6	towards	towards	ADP
fuelectenerg-1260	516	7	filling	fill	VERB
fuelectenerg-1260	516	8	a	a	DET
fuelectenerg-1260	516	9	long	long	ADJ
fuelectenerg-1260	516	10	existing	exist	VERB
fuelectenerg-1260	516	11	need	need	NOUN
fuelectenerg-1260	516	12	in	in	ADP
fuelectenerg-1260	516	13	virtual	virtual	ADJ
fuelectenerg-1260	516	14	prototyping	prototyping	NOUN
fuelectenerg-1260	516	15	.	.	PUNCT
fuelectenerg-1260	517	1	figures	figure	NOUN
fuelectenerg-1260	517	2	6c	6c	PROPN
fuelectenerg-1260	517	3	and	and	CCONJ
fuelectenerg-1260	517	4	6d	6d	NUM
fuelectenerg-1260	517	5	show	show	NOUN
fuelectenerg-1260	517	6	rendered	render	VERB
fuelectenerg-1260	517	7	images	image	NOUN
fuelectenerg-1260	517	8	(	(	PUNCT
fuelectenerg-1260	517	9	using	use	VERB
fuelectenerg-1260	517	10	the	the	DET
fuelectenerg-1260	517	11	wire	wire	NOUN
fuelectenerg-1260	517	12	meshes	mesh	NOUN
fuelectenerg-1260	517	13	calculated	calculate	VERB
fuelectenerg-1260	517	14	earlier	early	ADV
fuelectenerg-1260	517	15	)	)	PUNCT
fuelectenerg-1260	517	16	for	for	ADP
fuelectenerg-1260	517	17	etching	etch	VERB
fuelectenerg-1260	517	18	with	with	ADP
fuelectenerg-1260	517	19	a	a	DET
fuelectenerg-1260	517	20	square	square	NOUN
fuelectenerg-1260	517	21	and	and	CCONJ
fuelectenerg-1260	517	22	a	a	DET
fuelectenerg-1260	517	23	round	round	ADJ
fuelectenerg-1260	517	24	mask	mask	NOUN
fuelectenerg-1260	517	25	respectively	respectively	ADV
fuelectenerg-1260	517	26	.	.	PUNCT
fuelectenerg-1260	518	1	transparency	transparency	NOUN
fuelectenerg-1260	518	2	is	be	AUX
fuelectenerg-1260	518	3	part	part	NOUN
fuelectenerg-1260	518	4	of	of	ADP
fuelectenerg-1260	518	5	magda	magda	PROPN
fuelectenerg-1260	518	6	visualizations	visualization	NOUN
fuelectenerg-1260	518	7	,	,	PUNCT
fuelectenerg-1260	518	8	to	to	PART
fuelectenerg-1260	518	9	allow	allow	VERB
fuelectenerg-1260	518	10	better	well	ADJ
fuelectenerg-1260	518	11	perception	perception	NOUN
fuelectenerg-1260	518	12	of	of	ADP
fuelectenerg-1260	518	13	ongoing	ongoing	ADJ
fuelectenerg-1260	518	14	processes	process	NOUN
fuelectenerg-1260	518	15	.	.	PUNCT
fuelectenerg-1260	519	1	our	our	PRON
fuelectenerg-1260	519	2	marker	marker	NOUN
fuelectenerg-1260	519	3	string	string	NOUN
fuelectenerg-1260	519	4	method	method	NOUN
fuelectenerg-1260	519	5	can	can	AUX
fuelectenerg-1260	519	6	be	be	AUX
fuelectenerg-1260	519	7	adapted	adapt	VERB
fuelectenerg-1260	519	8	for	for	ADP
fuelectenerg-1260	519	9	direct	direct	ADJ
fuelectenerg-1260	519	10	laser	laser	NOUN
fuelectenerg-1260	519	11	writing	writing	NOUN
fuelectenerg-1260	519	12	(	(	PUNCT
fuelectenerg-1260	519	13	dlw	dlw	PROPN
fuelectenerg-1260	519	14	)	)	PUNCT
fuelectenerg-1260	519	15	.	.	PUNCT
fuelectenerg-1260	520	1	mems	mem	NOUN
fuelectenerg-1260	520	2	design	design	NOUN
fuelectenerg-1260	520	3	simplification	simplification	NOUN
fuelectenerg-1260	520	4	with	with	ADP
fuelectenerg-1260	520	5	virtual	virtual	ADJ
fuelectenerg-1260	520	6	prototyping	prototyping	NOUN
fuelectenerg-1260	520	7	29	29	NUM
fuelectenerg-1260	520	8	for	for	ADP
fuelectenerg-1260	520	9	the	the	DET
fuelectenerg-1260	520	10	simpler	simple	ADJ
fuelectenerg-1260	520	11	anisotropic	anisotropic	NOUN
fuelectenerg-1260	520	12	visual	visual	ADJ
fuelectenerg-1260	520	13	simulation	simulation	NOUN
fuelectenerg-1260	520	14	,	,	PUNCT
fuelectenerg-1260	520	15	we	we	PRON
fuelectenerg-1260	520	16	use	use	VERB
fuelectenerg-1260	520	17	the	the	DET
fuelectenerg-1260	520	18	etch	etch	NOUN
fuelectenerg-1260	520	19	rate	rate	NOUN
fuelectenerg-1260	520	20	together	together	ADV
fuelectenerg-1260	520	21	with	with	ADP
fuelectenerg-1260	520	22	data	datum	NOUN
fuelectenerg-1260	520	23	picked	pick	VERB
fuelectenerg-1260	520	24	from	from	ADP
fuelectenerg-1260	520	25	a	a	DET
fuelectenerg-1260	520	26	small	small	ADJ
fuelectenerg-1260	520	27	database	database	NOUN
fuelectenerg-1260	520	28	of	of	ADP
fuelectenerg-1260	520	29	materials	material	NOUN
fuelectenerg-1260	520	30	,	,	PUNCT
fuelectenerg-1260	520	31	crystalline	crystalline	NOUN
fuelectenerg-1260	520	32	orientation	orientation	NOUN
fuelectenerg-1260	520	33	,	,	PUNCT
fuelectenerg-1260	520	34	and	and	CCONJ
fuelectenerg-1260	520	35	etchant	etchant	NOUN
fuelectenerg-1260	520	36	.	.	PUNCT
fuelectenerg-1260	521	1	this	this	PRON
fuelectenerg-1260	521	2	is	be	AUX
fuelectenerg-1260	521	3	the	the	DET
fuelectenerg-1260	521	4	input	input	NOUN
fuelectenerg-1260	521	5	for	for	ADP
fuelectenerg-1260	521	6	the	the	DET
fuelectenerg-1260	521	7	visualization	visualization	NOUN
fuelectenerg-1260	521	8	,	,	PUNCT
fuelectenerg-1260	521	9	which	which	PRON
fuelectenerg-1260	521	10	is	be	AUX
fuelectenerg-1260	521	11	displayed	display	VERB
fuelectenerg-1260	521	12	progressively	progressively	ADV
fuelectenerg-1260	521	13	at	at	ADP
fuelectenerg-1260	521	14	simulated	simulated	ADJ
fuelectenerg-1260	521	15	times	time	NOUN
fuelectenerg-1260	521	16	(	(	PUNCT
fuelectenerg-1260	521	17	typically	typically	ADV
fuelectenerg-1260	521	18	2	2	NUM
fuelectenerg-1260	521	19	min	min	NOUN
fuelectenerg-1260	521	20	)	)	PUNCT
fuelectenerg-1260	521	21	intervals	interval	NOUN
fuelectenerg-1260	521	22	.	.	PUNCT
fuelectenerg-1260	522	1	image	image	NOUN
fuelectenerg-1260	522	2	transparency	transparency	NOUN
fuelectenerg-1260	522	3	is	be	AUX
fuelectenerg-1260	522	4	used	use	VERB
fuelectenerg-1260	522	5	to	to	PART
fuelectenerg-1260	522	6	be	be	AUX
fuelectenerg-1260	522	7	able	able	ADJ
fuelectenerg-1260	522	8	to	to	PART
fuelectenerg-1260	522	9	observe	observe	VERB
fuelectenerg-1260	522	10	the	the	DET
fuelectenerg-1260	522	11	progress	progress	NOUN
fuelectenerg-1260	522	12	of	of	ADP
fuelectenerg-1260	522	13	the	the	DET
fuelectenerg-1260	522	14	concave	concave	NOUN
fuelectenerg-1260	522	15	well	well	ADV
fuelectenerg-1260	522	16	formed	form	VERB
fuelectenerg-1260	522	17	by	by	ADP
fuelectenerg-1260	522	18	etching	etch	VERB
fuelectenerg-1260	522	19	using	use	VERB
fuelectenerg-1260	522	20	basic	basic	ADJ
fuelectenerg-1260	522	21	geometric	geometric	ADJ
fuelectenerg-1260	522	22	shape	shape	NOUN
fuelectenerg-1260	522	23	masks	mask	NOUN
fuelectenerg-1260	522	24	(	(	PUNCT
fuelectenerg-1260	522	25	square	square	ADJ
fuelectenerg-1260	522	26	,	,	PUNCT
fuelectenerg-1260	522	27	round	round	ADJ
fuelectenerg-1260	522	28	,	,	PUNCT
fuelectenerg-1260	522	29	rectangular	rectangular	ADJ
fuelectenerg-1260	522	30	)	)	PUNCT
fuelectenerg-1260	522	31	.	.	PUNCT
fuelectenerg-1260	523	1	this	this	DET
fuelectenerg-1260	523	2	process	process	NOUN
fuelectenerg-1260	523	3	could	could	AUX
fuelectenerg-1260	523	4	be	be	AUX
fuelectenerg-1260	523	5	used	use	VERB
fuelectenerg-1260	523	6	for	for	ADP
fuelectenerg-1260	523	7	a	a	DET
fuelectenerg-1260	523	8	round	round	ADJ
fuelectenerg-1260	523	9	shaped	shape	VERB
fuelectenerg-1260	523	10	mask	mask	NOUN
fuelectenerg-1260	523	11	only	only	ADV
fuelectenerg-1260	523	12	but	but	CCONJ
fuelectenerg-1260	523	13	other	other	ADJ
fuelectenerg-1260	523	14	mask	mask	NOUN
fuelectenerg-1260	523	15	geometries	geometry	NOUN
fuelectenerg-1260	523	16	will	will	AUX
fuelectenerg-1260	523	17	not	not	PART
fuelectenerg-1260	523	18	produce	produce	VERB
fuelectenerg-1260	523	19	a	a	DET
fuelectenerg-1260	523	20	truthful	truthful	ADJ
fuelectenerg-1260	523	21	visualization	visualization	NOUN
fuelectenerg-1260	523	22	[	[	X
fuelectenerg-1260	523	23	86	86	NUM
fuelectenerg-1260	523	24	]	]	PUNCT
fuelectenerg-1260	523	25	.	.	PUNCT
fuelectenerg-1260	524	1	6.6	6.6	NUM
fuelectenerg-1260	524	2	.	.	PUNCT
fuelectenerg-1260	525	1	microassembly	microassembly	ADV
fuelectenerg-1260	525	2	in	in	ADP
fuelectenerg-1260	525	3	small	small	ADJ
fuelectenerg-1260	525	4	mems	mem	NOUN
fuelectenerg-1260	525	5	microassembly	microassembly	ADV
fuelectenerg-1260	525	6	is	be	AUX
fuelectenerg-1260	525	7	integrated	integrate	VERB
fuelectenerg-1260	525	8	with	with	ADP
fuelectenerg-1260	525	9	their	their	PRON
fuelectenerg-1260	525	10	production	production	NOUN
fuelectenerg-1260	525	11	by	by	ADP
fuelectenerg-1260	525	12	etching	etch	VERB
fuelectenerg-1260	525	13	out	out	ADP
fuelectenerg-1260	525	14	structures	structure	NOUN
fuelectenerg-1260	525	15	and	and	CCONJ
fuelectenerg-1260	525	16	then	then	ADV
fuelectenerg-1260	525	17	underetching	underetche	VERB
fuelectenerg-1260	525	18	them	they	PRON
fuelectenerg-1260	525	19	for	for	ADP
fuelectenerg-1260	525	20	mobility	mobility	NOUN
fuelectenerg-1260	525	21	.	.	PUNCT
fuelectenerg-1260	526	1	in	in	ADP
fuelectenerg-1260	526	2	mems	mem	NOUN
fuelectenerg-1260	526	3	sufficiently	sufficiently	ADV
fuelectenerg-1260	526	4	large	large	ADJ
fuelectenerg-1260	526	5	to	to	PART
fuelectenerg-1260	526	6	be	be	AUX
fuelectenerg-1260	526	7	handled	handle	VERB
fuelectenerg-1260	526	8	under	under	ADP
fuelectenerg-1260	526	9	a	a	DET
fuelectenerg-1260	526	10	magnifying	magnifying	ADJ
fuelectenerg-1260	526	11	device	device	NOUN
fuelectenerg-1260	526	12	,	,	PUNCT
fuelectenerg-1260	526	13	microassembly	microassembly	ADV
fuelectenerg-1260	526	14	is	be	AUX
fuelectenerg-1260	526	15	done	do	VERB
fuelectenerg-1260	526	16	with	with	ADP
fuelectenerg-1260	526	17	microgrippers	microgripper	NOUN
fuelectenerg-1260	526	18	,	,	PUNCT
fuelectenerg-1260	526	19	but	but	CCONJ
fuelectenerg-1260	526	20	there	there	PRON
fuelectenerg-1260	526	21	are	be	VERB
fuelectenerg-1260	526	22	other	other	ADJ
fuelectenerg-1260	526	23	means	mean	NOUN
fuelectenerg-1260	526	24	e.g.	e.g.	ADV
fuelectenerg-1260	526	25	air	air	NOUN
fuelectenerg-1260	526	26	,	,	PUNCT
fuelectenerg-1260	526	27	magnets	magnet	NOUN
fuelectenerg-1260	526	28	,	,	PUNCT
fuelectenerg-1260	526	29	liquids	liquid	NOUN
fuelectenerg-1260	526	30	,	,	PUNCT
fuelectenerg-1260	526	31	etc	etc	X
fuelectenerg-1260	526	32	.	.	X
fuelectenerg-1260	527	1	in	in	ADP
fuelectenerg-1260	527	2	magda	magda	PROPN
fuelectenerg-1260	527	3	we	we	PRON
fuelectenerg-1260	527	4	do	do	AUX
fuelectenerg-1260	527	5	simulate	simulate	VERB
fuelectenerg-1260	527	6	microassembly	microassembly	ADV
fuelectenerg-1260	527	7	disregarding	disregard	VERB
fuelectenerg-1260	527	8	the	the	DET
fuelectenerg-1260	527	9	nature	nature	NOUN
fuelectenerg-1260	527	10	of	of	ADP
fuelectenerg-1260	527	11	helping	help	VERB
fuelectenerg-1260	527	12	devices	device	NOUN
fuelectenerg-1260	527	13	(	(	PUNCT
fuelectenerg-1260	527	14	i.e.	i.e.	X
fuelectenerg-1260	527	15	microgrippers	microgripper	NOUN
fuelectenerg-1260	527	16	)	)	PUNCT
fuelectenerg-1260	527	17	or	or	CCONJ
fuelectenerg-1260	527	18	autonomous	autonomous	ADJ
fuelectenerg-1260	527	19	visual	visual	ADJ
fuelectenerg-1260	527	20	servoing	servoing	NOUN
fuelectenerg-1260	527	21	.	.	PUNCT
fuelectenerg-1260	528	1	we	we	PRON
fuelectenerg-1260	528	2	do	do	AUX
fuelectenerg-1260	528	3	not	not	PART
fuelectenerg-1260	528	4	simulate	simulate	VERB
fuelectenerg-1260	528	5	microgrippers	microgripper	NOUN
fuelectenerg-1260	528	6	or	or	CCONJ
fuelectenerg-1260	528	7	aiding	aid	VERB
fuelectenerg-1260	528	8	devices	device	NOUN
fuelectenerg-1260	528	9	.	.	PUNCT
fuelectenerg-1260	529	1	we	we	PRON
fuelectenerg-1260	529	2	mimic	mimic	VERB
fuelectenerg-1260	529	3	assembly	assembly	NOUN
fuelectenerg-1260	529	4	simply	simply	ADV
fuelectenerg-1260	529	5	by	by	ADP
fuelectenerg-1260	529	6	mouse	mouse	NOUN
fuelectenerg-1260	529	7	movements	movement	NOUN
fuelectenerg-1260	529	8	and	and	CCONJ
fuelectenerg-1260	529	9	clicks	click	VERB
fuelectenerg-1260	529	10	to	to	PART
fuelectenerg-1260	529	11	test	test	VERB
fuelectenerg-1260	529	12	the	the	DET
fuelectenerg-1260	529	13	feasibility	feasibility	NOUN
fuelectenerg-1260	529	14	of	of	ADP
fuelectenerg-1260	529	15	assembly	assembly	NOUN
fuelectenerg-1260	529	16	in	in	ADP
fuelectenerg-1260	529	17	our	our	PRON
fuelectenerg-1260	529	18	virtual	virtual	ADJ
fuelectenerg-1260	529	19	environment	environment	NOUN
fuelectenerg-1260	529	20	.	.	PUNCT
fuelectenerg-1260	530	1	simulating	simulate	VERB
fuelectenerg-1260	530	2	assembly	assembly	NOUN
fuelectenerg-1260	530	3	is	be	AUX
fuelectenerg-1260	530	4	important	important	ADJ
fuelectenerg-1260	530	5	.	.	PUNCT
fuelectenerg-1260	531	1	it	it	PRON
fuelectenerg-1260	531	2	allows	allow	VERB
fuelectenerg-1260	531	3	testing	testing	NOUN
fuelectenerg-1260	531	4	for	for	ADP
fuelectenerg-1260	531	5	conflicts	conflict	NOUN
fuelectenerg-1260	531	6	or	or	CCONJ
fuelectenerg-1260	531	7	impediments	impediment	NOUN
fuelectenerg-1260	531	8	in	in	ADP
fuelectenerg-1260	531	9	the	the	DET
fuelectenerg-1260	531	10	assembly	assembly	NOUN
fuelectenerg-1260	531	11	of	of	ADP
fuelectenerg-1260	531	12	a	a	DET
fuelectenerg-1260	531	13	device	device	NOUN
fuelectenerg-1260	531	14	before	before	ADP
fuelectenerg-1260	531	15	prototyping	prototyping	NOUN
fuelectenerg-1260	531	16	or	or	CCONJ
fuelectenerg-1260	531	17	production	production	NOUN
fuelectenerg-1260	531	18	.	.	PUNCT
fuelectenerg-1260	532	1	for	for	ADP
fuelectenerg-1260	532	2	interactive	interactive	ADJ
fuelectenerg-1260	532	3	vrp	vrp	NOUN
fuelectenerg-1260	532	4	these	these	DET
fuelectenerg-1260	532	5	algorithms	algorithm	NOUN
fuelectenerg-1260	532	6	have	have	VERB
fuelectenerg-1260	532	7	to	to	PART
fuelectenerg-1260	532	8	be	be	AUX
fuelectenerg-1260	532	9	fast	fast	ADJ
fuelectenerg-1260	532	10	and	and	CCONJ
fuelectenerg-1260	532	11	smooth	smooth	ADJ
fuelectenerg-1260	532	12	.	.	PUNCT
fuelectenerg-1260	533	1	precision	precision	NOUN
fuelectenerg-1260	533	2	in	in	ADP
fuelectenerg-1260	533	3	collision	collision	NOUN
fuelectenerg-1260	533	4	detection	detection	NOUN
fuelectenerg-1260	533	5	is	be	AUX
fuelectenerg-1260	533	6	paramount	paramount	ADJ
fuelectenerg-1260	533	7	for	for	ADP
fuelectenerg-1260	533	8	virtual	virtual	ADJ
fuelectenerg-1260	533	9	microassembly	microassembly	ADV
fuelectenerg-1260	533	10	.	.	PUNCT
fuelectenerg-1260	534	1	to	to	ADP
fuelectenerg-1260	534	2	this	this	DET
fuelectenerg-1260	534	3	end	end	NOUN
fuelectenerg-1260	534	4	,	,	PUNCT
fuelectenerg-1260	534	5	a	a	DET
fuelectenerg-1260	534	6	comparison	comparison	NOUN
fuelectenerg-1260	534	7	of	of	ADP
fuelectenerg-1260	534	8	efficiency	efficiency	NOUN
fuelectenerg-1260	534	9	and	and	CCONJ
fuelectenerg-1260	534	10	suitability	suitability	NOUN
fuelectenerg-1260	534	11	of	of	ADP
fuelectenerg-1260	534	12	collision	collision	NOUN
fuelectenerg-1260	534	13	detections	detection	NOUN
fuelectenerg-1260	534	14	algorithms	algorithm	NOUN
fuelectenerg-1260	534	15	was	be	AUX
fuelectenerg-1260	534	16	performed	perform	VERB
fuelectenerg-1260	534	17	and	and	CCONJ
fuelectenerg-1260	534	18	a	a	DET
fuelectenerg-1260	534	19	new	new	ADJ
fuelectenerg-1260	534	20	,	,	PUNCT
fuelectenerg-1260	534	21	more	more	ADV
fuelectenerg-1260	534	22	suitable	suitable	ADJ
fuelectenerg-1260	534	23	and	and	CCONJ
fuelectenerg-1260	534	24	more	more	ADV
fuelectenerg-1260	534	25	efficient	efficient	ADJ
fuelectenerg-1260	534	26	algorithm	algorithm	NOUN
fuelectenerg-1260	534	27	was	be	AUX
fuelectenerg-1260	534	28	derived	derive	VERB
fuelectenerg-1260	535	1	[	[	PUNCT
fuelectenerg-1260	535	2	87	87	NUM
fuelectenerg-1260	535	3	]	]	PUNCT
fuelectenerg-1260	535	4	.	.	PUNCT
fuelectenerg-1260	536	1	this	this	DET
fuelectenerg-1260	536	2	algorithm	algorithm	NOUN
fuelectenerg-1260	536	3	exploits	exploit	VERB
fuelectenerg-1260	536	4	the	the	DET
fuelectenerg-1260	536	5	essentially	essentially	ADV
fuelectenerg-1260	536	6	2d	2d	NUM
fuelectenerg-1260	536	7	nature	nature	NOUN
fuelectenerg-1260	536	8	(	(	PUNCT
fuelectenerg-1260	536	9	flat	flat	ADJ
fuelectenerg-1260	536	10	shapes	shape	NOUN
fuelectenerg-1260	536	11	)	)	PUNCT
fuelectenerg-1260	536	12	of	of	ADP
fuelectenerg-1260	536	13	typical	typical	ADJ
fuelectenerg-1260	536	14	mems	mem	NOUN
fuelectenerg-1260	536	15	components	component	NOUN
fuelectenerg-1260	536	16	(	(	PUNCT
fuelectenerg-1260	536	17	which	which	PRON
fuelectenerg-1260	536	18	are	be	AUX
fuelectenerg-1260	536	19	often	often	ADV
fuelectenerg-1260	536	20	etched	etch	VERB
fuelectenerg-1260	536	21	into	into	ADP
fuelectenerg-1260	536	22	a	a	DET
fuelectenerg-1260	536	23	silicon	silicon	NOUN
fuelectenerg-1260	536	24	wafer	wafer	NOUN
fuelectenerg-1260	536	25	and	and	CCONJ
fuelectenerg-1260	536	26	then	then	ADV
fuelectenerg-1260	536	27	underetched	underetche	VERB
fuelectenerg-1260	536	28	and	and	CCONJ
fuelectenerg-1260	536	29	released	release	VERB
fuelectenerg-1260	536	30	)	)	PUNCT
fuelectenerg-1260	536	31	.	.	PUNCT
fuelectenerg-1260	537	1	in	in	ADP
fuelectenerg-1260	537	2	order	order	NOUN
fuelectenerg-1260	537	3	to	to	PART
fuelectenerg-1260	537	4	take	take	VERB
fuelectenerg-1260	537	5	advantage	advantage	NOUN
fuelectenerg-1260	537	6	of	of	ADP
fuelectenerg-1260	537	7	a	a	DET
fuelectenerg-1260	537	8	new	new	ADJ
fuelectenerg-1260	537	9	point	point	NOUN
fuelectenerg-1260	537	10	-	-	PUNCT
fuelectenerg-1260	537	11	based	base	VERB
fuelectenerg-1260	537	12	collision	collision	NOUN
fuelectenerg-1260	537	13	detection	detection	NOUN
fuelectenerg-1260	537	14	method	method	NOUN
fuelectenerg-1260	537	15	,	,	PUNCT
fuelectenerg-1260	537	16	a	a	DET
fuelectenerg-1260	537	17	convex	convex	NOUN
fuelectenerg-1260	537	18	hull	hull	NOUN
fuelectenerg-1260	537	19	is	be	AUX
fuelectenerg-1260	537	20	computed	compute	VERB
fuelectenerg-1260	537	21	around	around	ADP
fuelectenerg-1260	537	22	the	the	DET
fuelectenerg-1260	537	23	object	object	NOUN
fuelectenerg-1260	537	24	,	,	PUNCT
fuelectenerg-1260	537	25	and	and	CCONJ
fuelectenerg-1260	537	26	using	use	VERB
fuelectenerg-1260	537	27	this	this	DET
fuelectenerg-1260	537	28	convex	convex	NOUN
fuelectenerg-1260	537	29	hull	hull	NOUN
fuelectenerg-1260	537	30	,	,	PUNCT
fuelectenerg-1260	537	31	a	a	DET
fuelectenerg-1260	537	32	series	series	NOUN
fuelectenerg-1260	537	33	of	of	ADP
fuelectenerg-1260	537	34	concavities	concavity	NOUN
fuelectenerg-1260	537	35	is	be	AUX
fuelectenerg-1260	537	36	derived	derive	VERB
fuelectenerg-1260	537	37	.	.	PUNCT
fuelectenerg-1260	538	1	the	the	DET
fuelectenerg-1260	538	2	shape	shape	NOUN
fuelectenerg-1260	538	3	itself	itself	PRON
fuelectenerg-1260	538	4	and	and	CCONJ
fuelectenerg-1260	538	5	the	the	DET
fuelectenerg-1260	538	6	derived	derive	VERB
fuelectenerg-1260	538	7	concavities	concavity	NOUN
fuelectenerg-1260	538	8	are	be	AUX
fuelectenerg-1260	538	9	then	then	ADV
fuelectenerg-1260	538	10	divided	divide	VERB
fuelectenerg-1260	538	11	into	into	ADP
fuelectenerg-1260	538	12	a	a	DET
fuelectenerg-1260	538	13	minimum	minimum	ADJ
fuelectenerg-1260	538	14	number	number	NOUN
fuelectenerg-1260	538	15	of	of	ADP
fuelectenerg-1260	538	16	convex	convex	ADJ
fuelectenerg-1260	538	17	shapes	shape	NOUN
fuelectenerg-1260	538	18	.	.	PUNCT
fuelectenerg-1260	539	1	a	a	DET
fuelectenerg-1260	539	2	point	point	NOUN
fuelectenerg-1260	539	3	-	-	PUNCT
fuelectenerg-1260	539	4	based	base	VERB
fuelectenerg-1260	539	5	collision	collision	NOUN
fuelectenerg-1260	539	6	detection	detection	NOUN
fuelectenerg-1260	539	7	to	to	PART
fuelectenerg-1260	539	8	check	check	VERB
fuelectenerg-1260	539	9	for	for	ADP
fuelectenerg-1260	539	10	convex	convex	ADJ
fuelectenerg-1260	539	11	shapes	shape	NOUN
fuelectenerg-1260	539	12	can	can	AUX
fuelectenerg-1260	539	13	then	then	ADV
fuelectenerg-1260	539	14	be	be	AUX
fuelectenerg-1260	539	15	applied	apply	VERB
fuelectenerg-1260	539	16	in	in	ADP
fuelectenerg-1260	539	17	one	one	NUM
fuelectenerg-1260	539	18	of	of	ADP
fuelectenerg-1260	539	19	two	two	NUM
fuelectenerg-1260	539	20	ways	way	NOUN
fuelectenerg-1260	539	21	:	:	PUNCT
fuelectenerg-1260	539	22	(	(	PUNCT
fuelectenerg-1260	539	23	a	a	X
fuelectenerg-1260	539	24	)	)	PUNCT
fuelectenerg-1260	539	25	by	by	ADP
fuelectenerg-1260	539	26	checking	check	VERB
fuelectenerg-1260	539	27	all	all	DET
fuelectenerg-1260	539	28	the	the	DET
fuelectenerg-1260	539	29	convex	convex	PROPN
fuelectenerg-1260	539	30	bodies	body	NOUN
fuelectenerg-1260	539	31	that	that	PRON
fuelectenerg-1260	539	32	make	make	VERB
fuelectenerg-1260	539	33	up	up	ADP
fuelectenerg-1260	539	34	the	the	DET
fuelectenerg-1260	539	35	solid	solid	ADJ
fuelectenerg-1260	539	36	portion	portion	NOUN
fuelectenerg-1260	539	37	of	of	ADP
fuelectenerg-1260	539	38	the	the	DET
fuelectenerg-1260	539	39	object	object	NOUN
fuelectenerg-1260	539	40	,	,	PUNCT
fuelectenerg-1260	539	41	or	or	CCONJ
fuelectenerg-1260	539	42	(	(	PUNCT
fuelectenerg-1260	539	43	b	b	NOUN
fuelectenerg-1260	539	44	)	)	PUNCT
fuelectenerg-1260	539	45	by	by	ADP
fuelectenerg-1260	539	46	checking	check	VERB
fuelectenerg-1260	539	47	the	the	DET
fuelectenerg-1260	539	48	convex	convex	NOUN
fuelectenerg-1260	539	49	hull	hull	NOUN
fuelectenerg-1260	539	50	and	and	CCONJ
fuelectenerg-1260	539	51	the	the	DET
fuelectenerg-1260	539	52	concavities	concavity	NOUN
fuelectenerg-1260	539	53	to	to	PART
fuelectenerg-1260	539	54	rule	rule	VERB
fuelectenerg-1260	539	55	out	out	ADP
fuelectenerg-1260	539	56	a	a	DET
fuelectenerg-1260	539	57	possible	possible	ADJ
fuelectenerg-1260	539	58	collision	collision	NOUN
fuelectenerg-1260	539	59	.	.	PUNCT
fuelectenerg-1260	540	1	by	by	ADP
fuelectenerg-1260	540	2	using	use	VERB
fuelectenerg-1260	540	3	the	the	DET
fuelectenerg-1260	540	4	method	method	NOUN
fuelectenerg-1260	540	5	that	that	PRON
fuelectenerg-1260	540	6	requires	require	VERB
fuelectenerg-1260	540	7	the	the	DET
fuelectenerg-1260	540	8	least	least	ADJ
fuelectenerg-1260	540	9	number	number	NOUN
fuelectenerg-1260	540	10	of	of	ADP
fuelectenerg-1260	540	11	checks	check	NOUN
fuelectenerg-1260	540	12	,	,	PUNCT
fuelectenerg-1260	540	13	we	we	PRON
fuelectenerg-1260	540	14	can	can	AUX
fuelectenerg-1260	540	15	arrive	arrive	VERB
fuelectenerg-1260	540	16	at	at	ADP
fuelectenerg-1260	540	17	a	a	DET
fuelectenerg-1260	540	18	result	result	NOUN
fuelectenerg-1260	540	19	in	in	ADP
fuelectenerg-1260	540	20	the	the	DET
fuelectenerg-1260	540	21	quickest	quick	ADJ
fuelectenerg-1260	540	22	manner	manner	NOUN
fuelectenerg-1260	540	23	possible	possible	ADJ
fuelectenerg-1260	540	24	.	.	PUNCT
fuelectenerg-1260	541	1	this	this	DET
fuelectenerg-1260	541	2	modification	modification	NOUN
fuelectenerg-1260	541	3	produces	produce	VERB
fuelectenerg-1260	541	4	a	a	DET
fuelectenerg-1260	541	5	computational	computational	ADJ
fuelectenerg-1260	541	6	advantage	advantage	NOUN
fuelectenerg-1260	541	7	of	of	ADP
fuelectenerg-1260	541	8	this	this	DET
fuelectenerg-1260	541	9	method	method	NOUN
fuelectenerg-1260	541	10	over	over	ADP
fuelectenerg-1260	541	11	other	other	ADJ
fuelectenerg-1260	541	12	popular	popular	ADJ
fuelectenerg-1260	541	13	existing	exist	VERB
fuelectenerg-1260	541	14	methods	method	NOUN
fuelectenerg-1260	541	15	for	for	ADP
fuelectenerg-1260	541	16	2d	2d	NUM
fuelectenerg-1260	541	17	(	(	PUNCT
fuelectenerg-1260	541	18	and	and	CCONJ
fuelectenerg-1260	541	19	3d	3d	X
fuelectenerg-1260	541	20	)	)	PUNCT
fuelectenerg-1260	541	21	collision	collision	NOUN
fuelectenerg-1260	541	22	detection	detection	NOUN
fuelectenerg-1260	541	23	.	.	PUNCT
fuelectenerg-1260	542	1	6.7	6.7	NUM
fuelectenerg-1260	542	2	.	.	PUNCT
fuelectenerg-1260	543	1	design	design	NOUN
fuelectenerg-1260	543	2	desk	desk	NOUN
fuelectenerg-1260	543	3	a	a	DET
fuelectenerg-1260	543	4	design	design	NOUN
fuelectenerg-1260	543	5	drawing	drawing	NOUN
fuelectenerg-1260	543	6	board	board	NOUN
fuelectenerg-1260	543	7	was	be	AUX
fuelectenerg-1260	543	8	implemented	implement	VERB
fuelectenerg-1260	543	9	in	in	ADP
fuelectenerg-1260	543	10	magda	magda	PROPN
fuelectenerg-1260	543	11	.	.	PUNCT
fuelectenerg-1260	544	1	a	a	DET
fuelectenerg-1260	544	2	range	range	NOUN
fuelectenerg-1260	544	3	of	of	ADP
fuelectenerg-1260	544	4	shapes	shape	NOUN
fuelectenerg-1260	544	5	and	and	CCONJ
fuelectenerg-1260	544	6	typical	typical	ADJ
fuelectenerg-1260	544	7	mems	mem	NOUN
fuelectenerg-1260	544	8	components	component	NOUN
fuelectenerg-1260	544	9	can	can	AUX
fuelectenerg-1260	544	10	be	be	AUX
fuelectenerg-1260	544	11	picked	pick	VERB
fuelectenerg-1260	544	12	and	and	CCONJ
fuelectenerg-1260	544	13	placed	place	VERB
fuelectenerg-1260	544	14	on	on	ADP
fuelectenerg-1260	544	15	the	the	DET
fuelectenerg-1260	544	16	drawing	drawing	NOUN
fuelectenerg-1260	544	17	board	board	NOUN
fuelectenerg-1260	544	18	.	.	PUNCT
fuelectenerg-1260	545	1	this	this	PRON
fuelectenerg-1260	545	2	is	be	AUX
fuelectenerg-1260	545	3	includes	include	VERB
fuelectenerg-1260	545	4	free	free	ADJ
fuelectenerg-1260	545	5	hand	hand	NOUN
fuelectenerg-1260	545	6	drawing	draw	VERB
fuelectenerg-1260	545	7	a	a	DET
fuelectenerg-1260	545	8	component	component	NOUN
fuelectenerg-1260	545	9	.	.	PUNCT
fuelectenerg-1260	546	1	all	all	DET
fuelectenerg-1260	546	2	components	component	NOUN
fuelectenerg-1260	546	3	can	can	AUX
fuelectenerg-1260	546	4	be	be	AUX
fuelectenerg-1260	546	5	edited	edit	VERB
fuelectenerg-1260	546	6	,	,	PUNCT
fuelectenerg-1260	546	7	e.g.	e.g.	ADV
fuelectenerg-1260	546	8	the	the	DET
fuelectenerg-1260	546	9	number	number	NOUN
fuelectenerg-1260	546	10	and	and	CCONJ
fuelectenerg-1260	546	11	sizes	size	NOUN
fuelectenerg-1260	546	12	of	of	ADP
fuelectenerg-1260	546	13	cogs	cog	NOUN
fuelectenerg-1260	546	14	in	in	ADP
fuelectenerg-1260	546	15	a	a	DET
fuelectenerg-1260	546	16	gear	gear	NOUN
fuelectenerg-1260	546	17	or	or	CCONJ
fuelectenerg-1260	546	18	comb	comb	NOUN
fuelectenerg-1260	546	19	.	.	PUNCT
fuelectenerg-1260	547	1	fig	fig	NOUN
fuelectenerg-1260	547	2	.	.	PUNCT
fuelectenerg-1260	548	1	7	7	NUM
fuelectenerg-1260	548	2	shows	show	VERB
fuelectenerg-1260	548	3	some	some	DET
fuelectenerg-1260	548	4	examples	example	NOUN
fuelectenerg-1260	548	5	of	of	ADP
fuelectenerg-1260	548	6	the	the	DET
fuelectenerg-1260	548	7	interface	interface	NOUN
fuelectenerg-1260	548	8	.	.	PUNCT
fuelectenerg-1260	549	1	this	this	DET
fuelectenerg-1260	549	2	work	work	NOUN
fuelectenerg-1260	549	3	was	be	AUX
fuelectenerg-1260	549	4	done	do	VERB
fuelectenerg-1260	549	5	by	by	ADP
fuelectenerg-1260	549	6	final	final	ADJ
fuelectenerg-1260	549	7	year	year	NOUN
fuelectenerg-1260	549	8	students	student	NOUN
fuelectenerg-1260	549	9	from	from	ADP
fuelectenerg-1260	549	10	germany	germany	PROPN
fuelectenerg-1260	549	11	[	[	X
fuelectenerg-1260	549	12	88	88	NUM
fuelectenerg-1260	549	13	]	]	PUNCT
fuelectenerg-1260	549	14	.	.	PUNCT
fuelectenerg-1260	550	1	30	30	NUM
fuelectenerg-1260	550	2	r.	r.	PROPN
fuelectenerg-1260	550	3	sitte	sitte	PROPN
fuelectenerg-1260	550	4	fig	fig	PROPN
fuelectenerg-1260	550	5	.	.	PUNCT
fuelectenerg-1260	551	1	7	7	NUM
fuelectenerg-1260	551	2	examples	example	NOUN
fuelectenerg-1260	551	3	of	of	ADP
fuelectenerg-1260	551	4	the	the	DET
fuelectenerg-1260	551	5	shapes	shape	NOUN
fuelectenerg-1260	551	6	available	available	ADJ
fuelectenerg-1260	551	7	from	from	ADP
fuelectenerg-1260	551	8	magda	magda	PROPN
fuelectenerg-1260	551	9	drawing	drawing	NOUN
fuelectenerg-1260	551	10	desk	desk	NOUN
fuelectenerg-1260	551	11	menu	menu	NOUN
fuelectenerg-1260	551	12	.	.	PUNCT
fuelectenerg-1260	552	1	all	all	DET
fuelectenerg-1260	552	2	shapes	shape	NOUN
fuelectenerg-1260	552	3	can	can	AUX
fuelectenerg-1260	552	4	be	be	AUX
fuelectenerg-1260	552	5	extruded	extrude	VERB
fuelectenerg-1260	552	6	into	into	ADP
fuelectenerg-1260	552	7	3d	3d	NUM
fuelectenerg-1260	552	8	shapes	shape	NOUN
fuelectenerg-1260	552	9	that	that	PRON
fuelectenerg-1260	552	10	can	can	AUX
fuelectenerg-1260	552	11	be	be	AUX
fuelectenerg-1260	552	12	placed	place	VERB
fuelectenerg-1260	552	13	individually	individually	ADV
fuelectenerg-1260	552	14	or	or	CCONJ
fuelectenerg-1260	552	15	merged	merge	VERB
fuelectenerg-1260	552	16	(	(	PUNCT
fuelectenerg-1260	552	17	intersected	intersect	VERB
fuelectenerg-1260	552	18	)	)	PUNCT
fuelectenerg-1260	552	19	to	to	ADP
fuelectenerg-1260	552	20	other	other	ADJ
fuelectenerg-1260	552	21	shapes	shape	NOUN
fuelectenerg-1260	552	22	.	.	PUNCT
fuelectenerg-1260	553	1	the	the	DET
fuelectenerg-1260	553	2	shapes	shape	NOUN
fuelectenerg-1260	553	3	can	can	AUX
fuelectenerg-1260	553	4	be	be	AUX
fuelectenerg-1260	553	5	associated	associate	VERB
fuelectenerg-1260	553	6	with	with	ADP
fuelectenerg-1260	553	7	materials	material	NOUN
fuelectenerg-1260	553	8	from	from	ADP
fuelectenerg-1260	553	9	a	a	DET
fuelectenerg-1260	553	10	small	small	ADJ
fuelectenerg-1260	553	11	database	database	NOUN
fuelectenerg-1260	553	12	[	[	X
fuelectenerg-1260	553	13	88	88	NUM
fuelectenerg-1260	553	14	]	]	PUNCT
fuelectenerg-1260	553	15	.	.	PUNCT
fuelectenerg-1260	554	1	in	in	ADP
fuelectenerg-1260	554	2	its	its	PRON
fuelectenerg-1260	554	3	current	current	ADJ
fuelectenerg-1260	554	4	state	state	NOUN
fuelectenerg-1260	554	5	,	,	PUNCT
fuelectenerg-1260	554	6	the	the	DET
fuelectenerg-1260	554	7	user	user	NOUN
fuelectenerg-1260	554	8	interface	interface	NOUN
fuelectenerg-1260	554	9	and	and	CCONJ
fuelectenerg-1260	554	10	drawing	draw	VERB
fuelectenerg-1260	554	11	board	board	NOUN
fuelectenerg-1260	554	12	of	of	ADP
fuelectenerg-1260	554	13	magda	magda	PROPN
fuelectenerg-1260	554	14	are	be	AUX
fuelectenerg-1260	554	15	implemented	implement	VERB
fuelectenerg-1260	554	16	with	with	ADP
fuelectenerg-1260	554	17	a	a	DET
fuelectenerg-1260	554	18	good	good	ADJ
fuelectenerg-1260	554	19	range	range	NOUN
fuelectenerg-1260	554	20	of	of	ADP
fuelectenerg-1260	554	21	mems	mem	NOUN
fuelectenerg-1260	554	22	components	component	NOUN
fuelectenerg-1260	554	23	,	,	PUNCT
fuelectenerg-1260	554	24	facilities	facility	NOUN
fuelectenerg-1260	554	25	and	and	CCONJ
fuelectenerg-1260	554	26	3d	3d	NUM
fuelectenerg-1260	554	27	including	include	VERB
fuelectenerg-1260	554	28	rotation	rotation	NOUN
fuelectenerg-1260	554	29	and	and	CCONJ
fuelectenerg-1260	554	30	assembly	assembly	NOUN
fuelectenerg-1260	554	31	.	.	PUNCT
fuelectenerg-1260	555	1	the	the	DET
fuelectenerg-1260	555	2	moving	move	VERB
fuelectenerg-1260	555	3	parts	part	NOUN
fuelectenerg-1260	555	4	(	(	PUNCT
fuelectenerg-1260	555	5	membranes	membrane	NOUN
fuelectenerg-1260	555	6	,	,	PUNCT
fuelectenerg-1260	555	7	cantilevers	cantilever	NOUN
fuelectenerg-1260	555	8	,	,	PUNCT
fuelectenerg-1260	555	9	fluids	fluid	NOUN
fuelectenerg-1260	555	10	)	)	PUNCT
fuelectenerg-1260	555	11	and	and	CCONJ
fuelectenerg-1260	555	12	consequently	consequently	ADV
fuelectenerg-1260	555	13	the	the	DET
fuelectenerg-1260	555	14	functioning	functioning	NOUN
fuelectenerg-1260	555	15	of	of	ADP
fuelectenerg-1260	555	16	mems	mem	NOUN
fuelectenerg-1260	555	17	as	as	SCONJ
fuelectenerg-1260	555	18	described	describe	VERB
fuelectenerg-1260	555	19	earlier	early	ADV
fuelectenerg-1260	555	20	are	be	AUX
fuelectenerg-1260	555	21	researched	research	VERB
fuelectenerg-1260	555	22	and	and	CCONJ
fuelectenerg-1260	555	23	published	publish	VERB
fuelectenerg-1260	555	24	but	but	CCONJ
fuelectenerg-1260	555	25	not	not	PART
fuelectenerg-1260	555	26	implemented	implement	VERB
fuelectenerg-1260	555	27	in	in	ADP
fuelectenerg-1260	555	28	code	code	NOUN
fuelectenerg-1260	555	29	.	.	PUNCT
fuelectenerg-1260	556	1	this	this	PRON
fuelectenerg-1260	556	2	is	be	AUX
fuelectenerg-1260	556	3	the	the	DET
fuelectenerg-1260	556	4	sad	sad	ADJ
fuelectenerg-1260	556	5	consequence	consequence	NOUN
fuelectenerg-1260	556	6	of	of	ADP
fuelectenerg-1260	556	7	disrupted	disrupt	VERB
fuelectenerg-1260	556	8	research	research	NOUN
fuelectenerg-1260	556	9	continuity	continuity	NOUN
fuelectenerg-1260	556	10	as	as	SCONJ
fuelectenerg-1260	556	11	it	it	PRON
fuelectenerg-1260	556	12	happens	happen	VERB
fuelectenerg-1260	556	13	when	when	SCONJ
fuelectenerg-1260	556	14	postgraduate	postgraduate	NOUN
fuelectenerg-1260	556	15	students	student	NOUN
fuelectenerg-1260	556	16	graduate	graduate	VERB
fuelectenerg-1260	556	17	and	and	CCONJ
fuelectenerg-1260	556	18	other	other	ADJ
fuelectenerg-1260	556	19	key	key	ADJ
fuelectenerg-1260	556	20	players	player	NOUN
fuelectenerg-1260	556	21	retire	retire	VERB
fuelectenerg-1260	556	22	altogether	altogether	ADV
fuelectenerg-1260	556	23	.	.	PUNCT
fuelectenerg-1260	557	1	magda	magda	PROPN
fuelectenerg-1260	557	2	should	should	AUX
fuelectenerg-1260	557	3	be	be	AUX
fuelectenerg-1260	557	4	continued	continue	VERB
fuelectenerg-1260	557	5	,	,	PUNCT
fuelectenerg-1260	557	6	but	but	CCONJ
fuelectenerg-1260	557	7	it	it	PRON
fuelectenerg-1260	557	8	needs	need	VERB
fuelectenerg-1260	557	9	a	a	DET
fuelectenerg-1260	557	10	new	new	ADJ
fuelectenerg-1260	557	11	owner	owner	NOUN
fuelectenerg-1260	557	12	,	,	PUNCT
fuelectenerg-1260	557	13	new	new	ADJ
fuelectenerg-1260	557	14	postgraduate	postgraduate	NOUN
fuelectenerg-1260	557	15	students	student	NOUN
fuelectenerg-1260	557	16	and	and	CCONJ
fuelectenerg-1260	557	17	programmers	programmer	NOUN
fuelectenerg-1260	557	18	.	.	PUNCT
fuelectenerg-1260	558	1	our	our	PRON
fuelectenerg-1260	558	2	team	team	NOUN
fuelectenerg-1260	558	3	has	have	AUX
fuelectenerg-1260	558	4	done	do	VERB
fuelectenerg-1260	558	5	the	the	DET
fuelectenerg-1260	558	6	groundwork	groundwork	NOUN
fuelectenerg-1260	558	7	and	and	CCONJ
fuelectenerg-1260	558	8	set	set	VERB
fuelectenerg-1260	558	9	the	the	DET
fuelectenerg-1260	558	10	foundation	foundation	NOUN
fuelectenerg-1260	558	11	but	but	CCONJ
fuelectenerg-1260	558	12	this	this	PRON
fuelectenerg-1260	558	13	is	be	AUX
fuelectenerg-1260	558	14	just	just	ADV
fuelectenerg-1260	558	15	the	the	DET
fuelectenerg-1260	558	16	tip	tip	NOUN
fuelectenerg-1260	558	17	of	of	ADP
fuelectenerg-1260	558	18	the	the	DET
fuelectenerg-1260	558	19	iceberg	iceberg	NOUN
fuelectenerg-1260	558	20	.	.	PUNCT
fuelectenerg-1260	559	1	one	one	NUM
fuelectenerg-1260	559	2	option	option	NOUN
fuelectenerg-1260	559	3	is	be	AUX
fuelectenerg-1260	559	4	to	to	PART
fuelectenerg-1260	559	5	continue	continue	VERB
fuelectenerg-1260	559	6	it	it	PRON
fuelectenerg-1260	559	7	as	as	ADP
fuelectenerg-1260	559	8	a	a	DET
fuelectenerg-1260	559	9	wiki	wiki	NOUN
fuelectenerg-1260	559	10	with	with	ADP
fuelectenerg-1260	559	11	global	global	ADJ
fuelectenerg-1260	559	12	contribution	contribution	NOUN
fuelectenerg-1260	559	13	,	,	PUNCT
fuelectenerg-1260	559	14	but	but	CCONJ
fuelectenerg-1260	559	15	this	this	PRON
fuelectenerg-1260	559	16	is	be	AUX
fuelectenerg-1260	559	17	dangerous	dangerous	ADJ
fuelectenerg-1260	559	18	and	and	CCONJ
fuelectenerg-1260	559	19	difficult	difficult	ADJ
fuelectenerg-1260	559	20	to	to	PART
fuelectenerg-1260	559	21	track	track	VERB
fuelectenerg-1260	559	22	for	for	ADP
fuelectenerg-1260	559	23	scientific	scientific	ADJ
fuelectenerg-1260	559	24	correctness	correctness	NOUN
fuelectenerg-1260	559	25	.	.	PUNCT
fuelectenerg-1260	560	1	interactive	interactive	ADJ
fuelectenerg-1260	560	2	vr	vr	PROPN
fuelectenerg-1260	560	3	can	can	AUX
fuelectenerg-1260	560	4	do	do	VERB
fuelectenerg-1260	560	5	many	many	ADJ
fuelectenerg-1260	560	6	miracles	miracle	NOUN
fuelectenerg-1260	560	7	,	,	PUNCT
fuelectenerg-1260	560	8	not	not	PART
fuelectenerg-1260	560	9	necessarily	necessarily	ADV
fuelectenerg-1260	560	10	real	real	ADJ
fuelectenerg-1260	560	11	,	,	PUNCT
fuelectenerg-1260	560	12	but	but	CCONJ
fuelectenerg-1260	560	13	a	a	DET
fuelectenerg-1260	560	14	vp	vp	PROPN
fuelectenerg-1260	560	15	mems	mems	PROPN
fuelectenerg-1260	560	16	design	design	NOUN
fuelectenerg-1260	560	17	simulator	simulator	NOUN
fuelectenerg-1260	560	18	must	must	AUX
fuelectenerg-1260	560	19	stick	stick	VERB
fuelectenerg-1260	560	20	to	to	ADP
fuelectenerg-1260	560	21	the	the	DET
fuelectenerg-1260	560	22	reality	reality	NOUN
fuelectenerg-1260	560	23	and	and	CCONJ
fuelectenerg-1260	560	24	manufacturability	manufacturability	NOUN
fuelectenerg-1260	560	25	.	.	PUNCT
fuelectenerg-1260	561	1	the	the	DET
fuelectenerg-1260	561	2	results	result	NOUN
fuelectenerg-1260	561	3	must	must	AUX
fuelectenerg-1260	561	4	not	not	PART
fuelectenerg-1260	561	5	become	become	VERB
fuelectenerg-1260	561	6	cartoons	cartoon	NOUN
fuelectenerg-1260	561	7	,	,	PUNCT
fuelectenerg-1260	561	8	but	but	CCONJ
fuelectenerg-1260	561	9	they	they	PRON
fuelectenerg-1260	561	10	must	must	AUX
fuelectenerg-1260	561	11	neither	neither	CCONJ
fuelectenerg-1260	561	12	inhibit	inhibit	VERB
fuelectenerg-1260	561	13	what	what	PRON
fuelectenerg-1260	561	14	could	could	AUX
fuelectenerg-1260	561	15	be	be	AUX
fuelectenerg-1260	561	16	done	do	VERB
fuelectenerg-1260	561	17	in	in	ADP
fuelectenerg-1260	561	18	the	the	DET
fuelectenerg-1260	561	19	future	future	NOUN
fuelectenerg-1260	561	20	,	,	PUNCT
fuelectenerg-1260	561	21	for	for	ADP
fuelectenerg-1260	561	22	example	example	NOUN
fuelectenerg-1260	561	23	more	more	ADJ
fuelectenerg-1260	561	24	research	research	NOUN
fuelectenerg-1260	561	25	on	on	ADP
fuelectenerg-1260	561	26	a	a	DET
fuelectenerg-1260	561	27	cheap	cheap	ADJ
fuelectenerg-1260	561	28	mems	mem	NOUN
fuelectenerg-1260	561	29	technology	technology	NOUN
fuelectenerg-1260	561	30	with	with	ADP
fuelectenerg-1260	561	31	carbon	carbon	NOUN
fuelectenerg-1260	561	32	nanotubes	nanotube	NOUN
fuelectenerg-1260	561	33	.	.	PUNCT
fuelectenerg-1260	562	1	a	a	DET
fuelectenerg-1260	562	2	fast	fast	ADJ
fuelectenerg-1260	562	3	and	and	CCONJ
fuelectenerg-1260	562	4	easy	easy	ADJ
fuelectenerg-1260	562	5	virtual	virtual	ADJ
fuelectenerg-1260	562	6	prototyping	prototyping	NOUN
fuelectenerg-1260	562	7	environment	environment	NOUN
fuelectenerg-1260	562	8	could	could	AUX
fuelectenerg-1260	562	9	help	help	VERB
fuelectenerg-1260	562	10	finding	find	VERB
fuelectenerg-1260	562	11	manufacturable	manufacturable	ADJ
fuelectenerg-1260	562	12	designs	design	NOUN
fuelectenerg-1260	562	13	and	and	CCONJ
fuelectenerg-1260	562	14	cheaper	cheap	ADJ
fuelectenerg-1260	562	15	technology	technology	NOUN
fuelectenerg-1260	562	16	.	.	PUNCT
fuelectenerg-1260	563	1	one	one	PRON
fuelectenerg-1260	563	2	must	must	AUX
fuelectenerg-1260	563	3	never	never	ADV
fuelectenerg-1260	563	4	discard	discard	VERB
fuelectenerg-1260	563	5	a	a	DET
fuelectenerg-1260	563	6	jules	jule	NOUN
fuelectenerg-1260	563	7	verne	verne	NOUN
fuelectenerg-1260	563	8	’s	’s	PART
fuelectenerg-1260	563	9	like	like	ADP
fuelectenerg-1260	563	10	vision	vision	NOUN
fuelectenerg-1260	563	11	.	.	PUNCT
fuelectenerg-1260	564	1	to	to	PART
fuelectenerg-1260	564	2	climb	climb	VERB
fuelectenerg-1260	564	3	a	a	DET
fuelectenerg-1260	564	4	mountain	mountain	NOUN
fuelectenerg-1260	564	5	one	one	NOUN
fuelectenerg-1260	564	6	has	have	VERB
fuelectenerg-1260	564	7	to	to	PART
fuelectenerg-1260	564	8	take	take	VERB
fuelectenerg-1260	564	9	a	a	DET
fuelectenerg-1260	564	10	first	first	ADJ
fuelectenerg-1260	564	11	step	step	NOUN
fuelectenerg-1260	564	12	.	.	PUNCT
fuelectenerg-1260	565	1	we	we	PRON
fuelectenerg-1260	565	2	have	have	AUX
fuelectenerg-1260	565	3	done	do	VERB
fuelectenerg-1260	565	4	that	that	DET
fuelectenerg-1260	565	5	first	first	ADJ
fuelectenerg-1260	565	6	step	step	NOUN
fuelectenerg-1260	565	7	.	.	PUNCT
fuelectenerg-1260	566	1	now	now	ADV
fuelectenerg-1260	566	2	it	it	PRON
fuelectenerg-1260	566	3	needs	need	VERB
fuelectenerg-1260	566	4	a	a	DET
fuelectenerg-1260	566	5	next	next	ADJ
fuelectenerg-1260	566	6	generation	generation	NOUN
fuelectenerg-1260	566	7	and	and	CCONJ
fuelectenerg-1260	566	8	the	the	DET
fuelectenerg-1260	566	9	vision	vision	NOUN
fuelectenerg-1260	566	10	to	to	PART
fuelectenerg-1260	566	11	keep	keep	VERB
fuelectenerg-1260	566	12	on	on	ADP
fuelectenerg-1260	566	13	climbing	climb	VERB
fuelectenerg-1260	566	14	further	far	ADV
fuelectenerg-1260	566	15	.	.	PUNCT
fuelectenerg-1260	567	1	7	7	X
fuelectenerg-1260	567	2	.	.	X
fuelectenerg-1260	567	3	conclusions	conclusion	NOUN
fuelectenerg-1260	567	4	mems	mems	PROPN
fuelectenerg-1260	567	5	design	design	NOUN
fuelectenerg-1260	567	6	and	and	CCONJ
fuelectenerg-1260	567	7	fabrication	fabrication	NOUN
fuelectenerg-1260	567	8	are	be	AUX
fuelectenerg-1260	567	9	currently	currently	ADV
fuelectenerg-1260	567	10	in	in	ADP
fuelectenerg-1260	567	11	the	the	DET
fuelectenerg-1260	567	12	hands	hand	NOUN
fuelectenerg-1260	567	13	of	of	ADP
fuelectenerg-1260	567	14	a	a	DET
fuelectenerg-1260	567	15	highly	highly	ADV
fuelectenerg-1260	567	16	skilled	skilled	ADJ
fuelectenerg-1260	567	17	,	,	PUNCT
fuelectenerg-1260	567	18	highly	highly	ADV
fuelectenerg-1260	567	19	multidisciplinary	multidisciplinary	ADJ
fuelectenerg-1260	567	20	privileged	privileged	ADJ
fuelectenerg-1260	567	21	minority	minority	NOUN
fuelectenerg-1260	567	22	.	.	PUNCT
fuelectenerg-1260	568	1	to	to	PART
fuelectenerg-1260	568	2	continue	continue	VERB
fuelectenerg-1260	568	3	filling	fill	VERB
fuelectenerg-1260	568	4	the	the	DET
fuelectenerg-1260	568	5	trend	trend	NOUN
fuelectenerg-1260	568	6	of	of	ADP
fuelectenerg-1260	568	7	this	this	DET
fuelectenerg-1260	568	8	fast	fast	ADJ
fuelectenerg-1260	568	9	expanding	expand	VERB
fuelectenerg-1260	568	10	industry	industry	NOUN
fuelectenerg-1260	568	11	,	,	PUNCT
fuelectenerg-1260	568	12	we	we	PRON
fuelectenerg-1260	568	13	need	need	VERB
fuelectenerg-1260	568	14	to	to	PART
fuelectenerg-1260	568	15	find	find	VERB
fuelectenerg-1260	568	16	ways	way	NOUN
fuelectenerg-1260	568	17	to	to	PART
fuelectenerg-1260	568	18	ensure	ensure	VERB
fuelectenerg-1260	568	19	understanding	understanding	NOUN
fuelectenerg-1260	568	20	and	and	CCONJ
fuelectenerg-1260	568	21	development	development	NOUN
fuelectenerg-1260	568	22	of	of	ADP
fuelectenerg-1260	568	23	intuition	intuition	NOUN
fuelectenerg-1260	568	24	for	for	ADP
fuelectenerg-1260	568	25	mems	mem	NOUN
fuelectenerg-1260	568	26	to	to	ADP
fuelectenerg-1260	568	27	younger	young	ADJ
fuelectenerg-1260	568	28	generations	generation	NOUN
fuelectenerg-1260	568	29	and	and	CCONJ
fuelectenerg-1260	568	30	enable	enable	VERB
fuelectenerg-1260	568	31	the	the	DET
fuelectenerg-1260	568	32	way	way	NOUN
fuelectenerg-1260	568	33	to	to	PART
fuelectenerg-1260	568	34	satisfy	satisfy	VERB
fuelectenerg-1260	568	35	the	the	DET
fuelectenerg-1260	568	36	increasing	increase	VERB
fuelectenerg-1260	568	37	need	need	NOUN
fuelectenerg-1260	568	38	for	for	ADP
fuelectenerg-1260	568	39	innovation	innovation	NOUN
fuelectenerg-1260	568	40	and	and	CCONJ
fuelectenerg-1260	568	41	new	new	ADJ
fuelectenerg-1260	568	42	mems	mem	NOUN
fuelectenerg-1260	568	43	technologies	technology	NOUN
fuelectenerg-1260	568	44	in	in	ADP
fuelectenerg-1260	568	45	the	the	DET
fuelectenerg-1260	568	46	following	follow	VERB
fuelectenerg-1260	568	47	decades	decade	NOUN
fuelectenerg-1260	568	48	.	.	PUNCT
fuelectenerg-1260	569	1	the	the	DET
fuelectenerg-1260	569	2	aim	aim	NOUN
fuelectenerg-1260	569	3	of	of	ADP
fuelectenerg-1260	569	4	this	this	DET
fuelectenerg-1260	569	5	paper	paper	NOUN
fuelectenerg-1260	569	6	is	be	AUX
fuelectenerg-1260	569	7	to	to	PART
fuelectenerg-1260	569	8	motivate	motivate	VERB
fuelectenerg-1260	569	9	scholars	scholar	NOUN
fuelectenerg-1260	569	10	to	to	PART
fuelectenerg-1260	569	11	engage	engage	VERB
fuelectenerg-1260	569	12	in	in	ADP
fuelectenerg-1260	569	13	this	this	DET
fuelectenerg-1260	569	14	endeavour	endeavour	NOUN
fuelectenerg-1260	569	15	and	and	CCONJ
fuelectenerg-1260	569	16	contribute	contribute	VERB
fuelectenerg-1260	569	17	to	to	ADP
fuelectenerg-1260	569	18	researching	research	VERB
fuelectenerg-1260	569	19	fast	fast	ADJ
fuelectenerg-1260	569	20	algorithms	algorithm	NOUN
fuelectenerg-1260	569	21	suitable	suitable	ADJ
fuelectenerg-1260	569	22	for	for	ADP
fuelectenerg-1260	569	23	interactive	interactive	ADJ
fuelectenerg-1260	569	24	virtual	virtual	ADJ
fuelectenerg-1260	569	25	reality	reality	NOUN
fuelectenerg-1260	569	26	design	design	NOUN
fuelectenerg-1260	569	27	to	to	PART
fuelectenerg-1260	569	28	ease	ease	VERB
fuelectenerg-1260	569	29	mems	mem	NOUN
fuelectenerg-1260	569	30	understanding	understanding	NOUN
fuelectenerg-1260	569	31	.	.	PUNCT
fuelectenerg-1260	570	1	this	this	DET
fuelectenerg-1260	570	2	paper	paper	NOUN
fuelectenerg-1260	570	3	has	have	AUX
fuelectenerg-1260	570	4	also	also	ADV
fuelectenerg-1260	570	5	presented	present	VERB
fuelectenerg-1260	570	6	a	a	DET
fuelectenerg-1260	570	7	progression	progression	NOUN
fuelectenerg-1260	570	8	from	from	ADP
fuelectenerg-1260	570	9	earlier	early	ADJ
fuelectenerg-1260	570	10	research	research	NOUN
fuelectenerg-1260	570	11	on	on	ADP
fuelectenerg-1260	570	12	mems	mem	NOUN
fuelectenerg-1260	570	13	towards	towards	ADP
fuelectenerg-1260	570	14	alternative	alternative	ADJ
fuelectenerg-1260	570	15	technologies	technology	NOUN
fuelectenerg-1260	570	16	,	,	PUNCT
fuelectenerg-1260	570	17	prototyping	prototyping	NOUN
fuelectenerg-1260	570	18	and	and	CCONJ
fuelectenerg-1260	570	19	mems	mem	NOUN
fuelectenerg-1260	570	20	animated	animate	VERB
fuelectenerg-1260	570	21	virtual	virtual	ADJ
fuelectenerg-1260	570	22	prototyping	prototyping	NOUN
fuelectenerg-1260	570	23	design	design	NOUN
fuelectenerg-1260	570	24	aid	aid	NOUN
fuelectenerg-1260	570	25	(	(	PUNCT
fuelectenerg-1260	570	26	magda	magda	PROPN
fuelectenerg-1260	570	27	)	)	PUNCT
fuelectenerg-1260	570	28	.	.	PUNCT
fuelectenerg-1260	571	1	the	the	DET
fuelectenerg-1260	571	2	contribution	contribution	NOUN
fuelectenerg-1260	571	3	of	of	ADP
fuelectenerg-1260	571	4	our	our	PRON
fuelectenerg-1260	571	5	research	research	NOUN
fuelectenerg-1260	571	6	is	be	AUX
fuelectenerg-1260	571	7	that	that	SCONJ
fuelectenerg-1260	571	8	we	we	PRON
fuelectenerg-1260	571	9	demonstrated	demonstrate	VERB
fuelectenerg-1260	571	10	that	that	SCONJ
fuelectenerg-1260	571	11	there	there	PRON
fuelectenerg-1260	571	12	are	be	VERB
fuelectenerg-1260	571	13	ways	way	NOUN
fuelectenerg-1260	571	14	for	for	ADP
fuelectenerg-1260	571	15	alternative	alternative	ADJ
fuelectenerg-1260	571	16	methods	method	NOUN
fuelectenerg-1260	571	17	and	and	CCONJ
fuelectenerg-1260	571	18	faster	fast	ADJ
fuelectenerg-1260	571	19	calculations	calculation	NOUN
fuelectenerg-1260	571	20	for	for	ADP
fuelectenerg-1260	571	21	the	the	DET
fuelectenerg-1260	571	22	visualizations	visualization	NOUN
fuelectenerg-1260	571	23	,	,	PUNCT
fuelectenerg-1260	571	24	without	without	ADP
fuelectenerg-1260	571	25	compromising	compromise	VERB
fuelectenerg-1260	571	26	physical	physical	ADJ
fuelectenerg-1260	571	27	validity	validity	NOUN
fuelectenerg-1260	571	28	.	.	PUNCT
fuelectenerg-1260	572	1	magda	magda	PROPN
fuelectenerg-1260	572	2	is	be	AUX
fuelectenerg-1260	572	3	far	far	ADV
fuelectenerg-1260	572	4	from	from	ADP
fuelectenerg-1260	572	5	complete	complete	ADJ
fuelectenerg-1260	572	6	.	.	PUNCT
fuelectenerg-1260	573	1	we	we	PRON
fuelectenerg-1260	573	2	have	have	AUX
fuelectenerg-1260	573	3	barely	barely	ADV
fuelectenerg-1260	573	4	scratched	scratch	VERB
fuelectenerg-1260	573	5	the	the	DET
fuelectenerg-1260	573	6	surface	surface	NOUN
fuelectenerg-1260	573	7	.	.	PUNCT
fuelectenerg-1260	574	1	it	it	PRON
fuelectenerg-1260	574	2	needs	need	VERB
fuelectenerg-1260	574	3	to	to	PART
fuelectenerg-1260	574	4	be	be	AUX
fuelectenerg-1260	574	5	mems	mem	NOUN
fuelectenerg-1260	574	6	design	design	NOUN
fuelectenerg-1260	574	7	simplification	simplification	NOUN
fuelectenerg-1260	574	8	with	with	ADP
fuelectenerg-1260	574	9	virtual	virtual	ADJ
fuelectenerg-1260	574	10	prototyping	prototyping	NOUN
fuelectenerg-1260	574	11	31	31	NUM
fuelectenerg-1260	574	12	developed	develop	VERB
fuelectenerg-1260	574	13	further	far	ADV
fuelectenerg-1260	574	14	by	by	ADP
fuelectenerg-1260	574	15	dedicated	dedicated	ADJ
fuelectenerg-1260	574	16	programmers	programmer	NOUN
fuelectenerg-1260	574	17	to	to	PART
fuelectenerg-1260	574	18	complement	complement	VERB
fuelectenerg-1260	574	19	the	the	DET
fuelectenerg-1260	574	20	research	research	NOUN
fuelectenerg-1260	574	21	that	that	PRON
fuelectenerg-1260	574	22	we	we	PRON
fuelectenerg-1260	574	23	have	have	AUX
fuelectenerg-1260	574	24	initiated	initiate	VERB
fuelectenerg-1260	574	25	.	.	PUNCT
fuelectenerg-1260	575	1	this	this	PRON
fuelectenerg-1260	575	2	requires	require	VERB
fuelectenerg-1260	575	3	financing	financing	NOUN
fuelectenerg-1260	575	4	,	,	PUNCT
fuelectenerg-1260	575	5	implementation	implementation	NOUN
fuelectenerg-1260	575	6	with	with	ADP
fuelectenerg-1260	575	7	extended	extended	ADJ
fuelectenerg-1260	575	8	user	user	NOUN
fuelectenerg-1260	575	9	facilities	facility	NOUN
fuelectenerg-1260	575	10	,	,	PUNCT
fuelectenerg-1260	575	11	populating	populate	VERB
fuelectenerg-1260	575	12	databases	database	NOUN
fuelectenerg-1260	575	13	and	and	CCONJ
fuelectenerg-1260	575	14	beta	beta	NOUN
fuelectenerg-1260	575	15	testing	testing	NOUN
fuelectenerg-1260	575	16	by	by	ADP
fuelectenerg-1260	575	17	a	a	DET
fuelectenerg-1260	575	18	commercial	commercial	ADJ
fuelectenerg-1260	575	19	body	body	NOUN
fuelectenerg-1260	575	20	in	in	ADP
fuelectenerg-1260	575	21	continuous	continuous	ADJ
fuelectenerg-1260	575	22	cooperation	cooperation	NOUN
fuelectenerg-1260	575	23	with	with	ADP
fuelectenerg-1260	575	24	a	a	DET
fuelectenerg-1260	575	25	dedicated	dedicated	ADJ
fuelectenerg-1260	575	26	research	research	NOUN
fuelectenerg-1260	575	27	group	group	NOUN
fuelectenerg-1260	575	28	.	.	PUNCT
fuelectenerg-1260	576	1	references	reference	NOUN
fuelectenerg-1260	576	2	[	[	X
fuelectenerg-1260	576	3	1	1	X
fuelectenerg-1260	576	4	]	]	PUNCT
fuelectenerg-1260	576	5	j.	j.	PROPN
fuelectenerg-1260	576	6	m.	m.	PROPN
fuelectenerg-1260	576	7	karam	karam	PROPN
fuelectenerg-1260	576	8	,	,	PUNCT
fuelectenerg-1260	576	9	b.	b.	PROPN
fuelectenerg-1260	576	10	courtois	courtois	PROPN
fuelectenerg-1260	576	11	,	,	PUNCT
fuelectenerg-1260	576	12	h.	h.	PROPN
fuelectenerg-1260	576	13	boutamine	boutamine	PROPN
fuelectenerg-1260	576	14	,	,	PUNCT
fuelectenerg-1260	576	15	p.	p.	PROPN
fuelectenerg-1260	576	16	drake	drake	PROPN
fuelectenerg-1260	576	17	,	,	PUNCT
fuelectenerg-1260	576	18	a.	a.	PROPN
fuelectenerg-1260	576	19	poppe	poppe	PROPN
fuelectenerg-1260	576	20	,	,	PUNCT
fuelectenerg-1260	576	21	v.	v.	CCONJ
fuelectenerg-1260	576	22	szekely	szekely	ADV
fuelectenerg-1260	576	23	,	,	PUNCT
fuelectenerg-1260	576	24	m.	m.	NOUN
fuelectenerg-1260	576	25	rencz	rencz	PROPN
fuelectenerg-1260	576	26	,	,	PUNCT
fuelectenerg-1260	576	27	k.	k.	PROPN
fuelectenerg-1260	576	28	hofmann	hofmann	PROPN
fuelectenerg-1260	576	29	,	,	PUNCT
fuelectenerg-1260	576	30	and	and	CCONJ
fuelectenerg-1260	576	31	m.	m.	NOUN
fuelectenerg-1260	576	32	glesner	glesner	NOUN
fuelectenerg-1260	576	33	,	,	PUNCT
fuelectenerg-1260	576	34	“	"	PUNCT
fuelectenerg-1260	576	35	cad	cad	X
fuelectenerg-1260	576	36	and	and	CCONJ
fuelectenerg-1260	576	37	foundries	foundry	NOUN
fuelectenerg-1260	576	38	for	for	ADP
fuelectenerg-1260	576	39	microsystems	microsystem	NOUN
fuelectenerg-1260	576	40	”	"	PUNCT
fuelectenerg-1260	576	41	,	,	PUNCT
fuelectenerg-1260	576	42	in	in	ADP
fuelectenerg-1260	576	43	proceedings	proceeding	NOUN
fuelectenerg-1260	576	44	of	of	ADP
fuelectenerg-1260	576	45	the	the	DET
fuelectenerg-1260	576	46	34th	34th	ADJ
fuelectenerg-1260	576	47	conference	conference	NOUN
fuelectenerg-1260	576	48	on	on	ADP
fuelectenerg-1260	576	49	design	design	NOUN
fuelectenerg-1260	576	50	automation	automation	NOUN
fuelectenerg-1260	576	51	(	(	PUNCT
fuelectenerg-1260	576	52	dac	dac	PROPN
fuelectenerg-1260	576	53	’	'	PUNCT
fuelectenerg-1260	576	54	97	97	NUM
fuelectenerg-1260	576	55	)	)	PUNCT
fuelectenerg-1260	576	56	,	,	PUNCT
fuelectenerg-1260	576	57	anaheim	anaheim	PROPN
fuelectenerg-1260	576	58	,	,	PUNCT
fuelectenerg-1260	576	59	ca	ca	PROPN
fuelectenerg-1260	576	60	,	,	PUNCT
fuelectenerg-1260	576	61	usa	usa	PROPN
fuelectenerg-1260	576	62	,	,	PUNCT
fuelectenerg-1260	576	63	1997	1997	NUM
fuelectenerg-1260	576	64	,	,	PUNCT
fuelectenerg-1260	576	65	pp	pp	ADJ
fuelectenerg-1260	576	66	.	.	PUNCT
fuelectenerg-1260	577	1	674	674	NUM
fuelectenerg-1260	577	2	-	-	NUM
fuelectenerg-1260	577	3	679	679	NUM
fuelectenerg-1260	577	4	.	.	PUNCT
fuelectenerg-1260	578	1	[	[	X
fuelectenerg-1260	578	2	2	2	X
fuelectenerg-1260	578	3	]	]	PUNCT
fuelectenerg-1260	578	4	v.	v.	CCONJ
fuelectenerg-1260	578	5	saile	saile	PROPN
fuelectenerg-1260	578	6	,	,	PUNCT
fuelectenerg-1260	578	7	u.	u.	NOUN
fuelectenerg-1260	578	8	wallrabe	wallrabe	NOUN
fuelectenerg-1260	578	9	,	,	PUNCT
fuelectenerg-1260	578	10	o.	o.	NOUN
fuelectenerg-1260	578	11	tabata	tabata	NOUN
fuelectenerg-1260	578	12	,	,	PUNCT
fuelectenerg-1260	578	13	j.	j.	PROPN
fuelectenerg-1260	578	14	g.	g.	PROPN
fuelectenerg-1260	578	15	korvink	korvink	PROPN
fuelectenerg-1260	578	16	,	,	PUNCT
fuelectenerg-1260	578	17	eds	eds	PROPN
fuelectenerg-1260	578	18	.	.	PUNCT
fuelectenerg-1260	579	1	liga	liga	PROPN
fuelectenerg-1260	579	2	and	and	CCONJ
fuelectenerg-1260	579	3	its	its	PRON
fuelectenerg-1260	579	4	applications	application	NOUN
fuelectenerg-1260	579	5	,	,	PUNCT
fuelectenerg-1260	579	6	advanced	advanced	PROPN
fuelectenerg-1260	579	7	micro	micro	PROPN
fuelectenerg-1260	579	8	&	&	CCONJ
fuelectenerg-1260	579	9	nanosystems	nanosystem	NOUN
fuelectenerg-1260	579	10	,	,	PUNCT
fuelectenerg-1260	579	11	wiley	wiley	PROPN
fuelectenerg-1260	579	12	-	-	PUNCT
fuelectenerg-1260	579	13	vch	vch	PROPN
fuelectenerg-1260	579	14	vol	vol	NOUN
fuelectenerg-1260	579	15	.	.	PROPN
fuelectenerg-1260	579	16	7	7	NUM
fuelectenerg-1260	579	17	,	,	PUNCT
fuelectenerg-1260	579	18	2008	2008	NUM
fuelectenerg-1260	579	19	.	.	PUNCT
fuelectenerg-1260	580	1	[	[	X
fuelectenerg-1260	580	2	3	3	X
fuelectenerg-1260	580	3	]	]	X
fuelectenerg-1260	580	4	h.	h.	PROPN
fuelectenerg-1260	580	5	fujita	fujita	PROPN
fuelectenerg-1260	580	6	,	,	PUNCT
fuelectenerg-1260	580	7	“	"	PUNCT
fuelectenerg-1260	580	8	a	a	DET
fuelectenerg-1260	580	9	decade	decade	NOUN
fuelectenerg-1260	580	10	of	of	ADP
fuelectenerg-1260	580	11	mems	mem	NOUN
fuelectenerg-1260	580	12	and	and	CCONJ
fuelectenerg-1260	580	13	its	its	PRON
fuelectenerg-1260	580	14	future	future	NOUN
fuelectenerg-1260	580	15	”	"	PUNCT
fuelectenerg-1260	580	16	,	,	PUNCT
fuelectenerg-1260	580	17	mems	mem	NOUN
fuelectenerg-1260	580	18	'	'	NUM
fuelectenerg-1260	580	19	97	97	NUM
fuelectenerg-1260	580	20	,	,	PUNCT
fuelectenerg-1260	580	21	in	in	ADP
fuelectenerg-1260	580	22	proceedings	proceeding	NOUN
fuelectenerg-1260	580	23	,	,	PUNCT
fuelectenerg-1260	580	24	ieee	ieee	PROPN
fuelectenerg-1260	580	25	.	.	PUNCT
fuelectenerg-1260	580	26	,	,	PUNCT
fuelectenerg-1260	580	27	tenth	tenth	NOUN
fuelectenerg-1260	580	28	annual	annual	ADJ
fuelectenerg-1260	580	29	international	international	ADJ
fuelectenerg-1260	580	30	workshop	workshop	NOUN
fuelectenerg-1260	580	31	on	on	ADP
fuelectenerg-1260	580	32	micro	micro	X
fuelectenerg-1260	580	33	electro	electro	VERB
fuelectenerg-1260	580	34	mechanical	mechanical	ADJ
fuelectenerg-1260	580	35	systems	system	NOUN
fuelectenerg-1260	580	36	,	,	PUNCT
fuelectenerg-1260	580	37	26	26	NUM
fuelectenerg-1260	580	38	-	-	SYM
fuelectenerg-1260	580	39	30	30	NUM
fuelectenerg-1260	580	40	jan	jan	NOUN
fuelectenerg-1260	580	41	1997	1997	NUM
fuelectenerg-1260	580	42	,	,	PUNCT
fuelectenerg-1260	580	43	pp	pp	ADP
fuelectenerg-1260	580	44	1–7	1–7	X
fuelectenerg-1260	580	45	.	.	PUNCT
fuelectenerg-1260	581	1	[	[	X
fuelectenerg-1260	581	2	4	4	X
fuelectenerg-1260	581	3	]	]	PUNCT
fuelectenerg-1260	581	4	w.	w.	PROPN
fuelectenerg-1260	581	5	bacher	bacher	PROPN
fuelectenerg-1260	581	6	,	,	PUNCT
fuelectenerg-1260	581	7	v.	v.	ADP
fuelectenerg-1260	581	8	saile	saile	ADJ
fuelectenerg-1260	581	9	,	,	PUNCT
fuelectenerg-1260	581	10	liga	liga	ADJ
fuelectenerg-1260	581	11	,	,	PUNCT
fuelectenerg-1260	581	12	“	"	PUNCT
fuelectenerg-1260	581	13	von	von	PROPN
fuelectenerg-1260	581	14	der	der	PROPN
fuelectenerg-1260	581	15	trenndüse	trenndüse	PROPN
fuelectenerg-1260	581	16	zu	zu	PROPN
fuelectenerg-1260	581	17	zahnrädern	zahnrädern	PROPN
fuelectenerg-1260	581	18	für	für	PROPN
fuelectenerg-1260	581	19	luxusuhren	luxusuhren	PROPN
fuelectenerg-1260	581	20	”	"	PUNCT
fuelectenerg-1260	581	21	,	,	PUNCT
fuelectenerg-1260	581	22	nachrichten	nachrichten	ADJ
fuelectenerg-1260	581	23	–	–	PUNCT
fuelectenerg-1260	581	24	forschungszentrum	forschungszentrum	PROPN
fuelectenerg-1260	581	25	karlsruhe	karlsruhe	PROPN
fuelectenerg-1260	581	26	,	,	PUNCT
fuelectenerg-1260	581	27	jahrg	jahrg	ADJ
fuelectenerg-1260	581	28	.	.	PUNCT
fuelectenerg-1260	582	1	38	38	NUM
fuelectenerg-1260	582	2	,	,	PUNCT
fuelectenerg-1260	582	3	1	1	NUM
fuelectenerg-1260	582	4	-	-	SYM
fuelectenerg-1260	582	5	2/2006	2/2006	NUM
fuelectenerg-1260	582	6	,	,	PUNCT
fuelectenerg-1260	582	7	pp	pp	ADJ
fuelectenerg-1260	582	8	.	.	PUNCT
fuelectenerg-1260	583	1	84	84	NUM
fuelectenerg-1260	583	2	-	-	SYM
fuelectenerg-1260	583	3	86	86	NUM
fuelectenerg-1260	583	4	.	.	PUNCT
fuelectenerg-1260	584	1	[	[	X
fuelectenerg-1260	584	2	5	5	NUM
fuelectenerg-1260	584	3	]	]	PUNCT
fuelectenerg-1260	584	4	r.	r.	PROPN
fuelectenerg-1260	584	5	sitte	sitte	PROPN
fuelectenerg-1260	584	6	,	,	PUNCT
fuelectenerg-1260	584	7	“	"	PUNCT
fuelectenerg-1260	584	8	about	about	ADP
fuelectenerg-1260	584	9	the	the	DET
fuelectenerg-1260	584	10	predictability	predictability	NOUN
fuelectenerg-1260	584	11	and	and	CCONJ
fuelectenerg-1260	584	12	complexity	complexity	NOUN
fuelectenerg-1260	584	13	of	of	ADP
fuelectenerg-1260	584	14	complex	complex	ADJ
fuelectenerg-1260	584	15	systems	system	NOUN
fuelectenerg-1260	584	16	”	"	PUNCT
fuelectenerg-1260	584	17	in	in	ADP
fuelectenerg-1260	584	18	from	from	ADP
fuelectenerg-1260	584	19	system	system	NOUN
fuelectenerg-1260	584	20	complexity	complexity	NOUN
fuelectenerg-1260	584	21	to	to	PART
fuelectenerg-1260	584	22	emergent	emergent	VERB
fuelectenerg-1260	584	23	properties	property	NOUN
fuelectenerg-1260	584	24	m.a	m.a	PROPN
fuelectenerg-1260	584	25	.	.	PROPN
fuelectenerg-1260	584	26	aziz	aziz	PROPN
fuelectenerg-1260	584	27	-	-	PUNCT
fuelectenerg-1260	584	28	alaoui	alaoui	PROPN
fuelectenerg-1260	584	29	&	&	CCONJ
fuelectenerg-1260	584	30	cyrille	cyrille	PROPN
fuelectenerg-1260	584	31	bertelle	bertelle	PROPN
fuelectenerg-1260	584	32	(	(	PUNCT
fuelectenerg-1260	584	33	eds	ed	NOUN
fuelectenerg-1260	584	34	)	)	PUNCT
fuelectenerg-1260	584	35	,	,	PUNCT
fuelectenerg-1260	584	36	springer	springer	NOUN
fuelectenerg-1260	584	37	series	series	NOUN
fuelectenerg-1260	584	38	understanding	understand	VERB
fuelectenerg-1260	584	39	complex	complex	ADJ
fuelectenerg-1260	584	40	systems	system	NOUN
fuelectenerg-1260	584	41	,	,	PUNCT
fuelectenerg-1260	584	42	2009	2009	NUM
fuelectenerg-1260	584	43	,	,	PUNCT
fuelectenerg-1260	584	44	part	part	NOUN
fuelectenerg-1260	584	45	i	i	PRON
fuelectenerg-1260	584	46	,	,	PUNCT
fuelectenerg-1260	584	47	pp	pp	ADV
fuelectenerg-1260	584	48	23	23	NUM
fuelectenerg-1260	584	49	-	-	SYM
fuelectenerg-1260	584	50	48	48	NUM
fuelectenerg-1260	584	51	,	,	PUNCT
fuelectenerg-1260	584	52	isbn	isbn	ADJ
fuelectenerg-1260	584	53	978	978	NUM
fuelectenerg-1260	584	54	-	-	SYM
fuelectenerg-1260	584	55	3	3	NUM
fuelectenerg-1260	584	56	-	-	PUNCT
fuelectenerg-1260	584	57	642	642	NUM
fuelectenerg-1260	584	58	-	-	PUNCT
fuelectenerg-1260	584	59	02198	02198	NUM
fuelectenerg-1260	584	60	-	-	SYM
fuelectenerg-1260	584	61	5	5	NUM
fuelectenerg-1260	584	62	[	[	SYM
fuelectenerg-1260	584	63	6	6	NUM
fuelectenerg-1260	584	64	]	]	X
fuelectenerg-1260	584	65	k.j	k.j	PROPN
fuelectenerg-1260	584	66	.	.	PROPN
fuelectenerg-1260	584	67	rebello	rebello	PROPN
fuelectenerg-1260	584	68	,	,	PUNCT
fuelectenerg-1260	584	69	“	"	PUNCT
fuelectenerg-1260	584	70	applications	application	NOUN
fuelectenerg-1260	584	71	of	of	ADP
fuelectenerg-1260	584	72	mems	mem	NOUN
fuelectenerg-1260	584	73	in	in	ADP
fuelectenerg-1260	584	74	surgery	surgery	NOUN
fuelectenerg-1260	584	75	”	"	PUNCT
fuelectenerg-1260	584	76	,	,	PUNCT
fuelectenerg-1260	584	77	proceedings	proceeding	NOUN
fuelectenerg-1260	584	78	of	of	ADP
fuelectenerg-1260	584	79	the	the	DET
fuelectenerg-1260	584	80	ieee	ieee	NOUN
fuelectenerg-1260	584	81	,	,	PUNCT
fuelectenerg-1260	584	82	vol	vol	NOUN
fuelectenerg-1260	584	83	.	.	PROPN
fuelectenerg-1260	585	1	92	92	NUM
fuelectenerg-1260	585	2	,	,	PUNCT
fuelectenerg-1260	585	3	no	no	INTJ
fuelectenerg-1260	585	4	.	.	NOUN
fuelectenerg-1260	585	5	1	1	NUM
fuelectenerg-1260	585	6	,	,	PUNCT
fuelectenerg-1260	585	7	january	january	PROPN
fuelectenerg-1260	585	8	2004	2004	NUM
fuelectenerg-1260	585	9	,	,	PUNCT
fuelectenerg-1260	585	10	pp	pp	ADP
fuelectenerg-1260	585	11	45	45	NUM
fuelectenerg-1260	585	12	-	-	SYM
fuelectenerg-1260	585	13	55	55	NUM
fuelectenerg-1260	586	1	[	[	X
fuelectenerg-1260	586	2	7	7	NUM
fuelectenerg-1260	586	3	]	]	X
fuelectenerg-1260	586	4	b.	b.	PROPN
fuelectenerg-1260	586	5	margesin	margesin	PROPN
fuelectenerg-1260	586	6	,	,	PUNCT
fuelectenerg-1260	586	7	l.	l.	PROPN
fuelectenerg-1260	586	8	lorenzelli	lorenzelli	PROPN
fuelectenerg-1260	586	9	,	,	PUNCT
fuelectenerg-1260	586	10	“	"	PUNCT
fuelectenerg-1260	586	11	silicon	silicon	NOUN
fuelectenerg-1260	586	12	based	base	VERB
fuelectenerg-1260	586	13	physical	physical	ADJ
fuelectenerg-1260	586	14	and	and	CCONJ
fuelectenerg-1260	586	15	biophysical	biophysical	ADJ
fuelectenerg-1260	586	16	microsystems	microsystem	NOUN
fuelectenerg-1260	586	17	:	:	PUNCT
fuelectenerg-1260	586	18	two	two	NUM
fuelectenerg-1260	586	19	case	case	NOUN
fuelectenerg-1260	586	20	studies	study	NOUN
fuelectenerg-1260	586	21	,	,	PUNCT
fuelectenerg-1260	586	22	sensors	sensor	NOUN
fuelectenerg-1260	586	23	and	and	CCONJ
fuelectenerg-1260	586	24	microsystems	microsystem	NOUN
fuelectenerg-1260	586	25	"	"	PUNCT
fuelectenerg-1260	586	26	,	,	PUNCT
fuelectenerg-1260	586	27	sensors	sensor	NOUN
fuelectenerg-1260	586	28	and	and	CCONJ
fuelectenerg-1260	586	29	microsystems	microsystem	NOUN
fuelectenerg-1260	586	30	,	,	PUNCT
fuelectenerg-1260	586	31	pp	pp	ADP
fuelectenerg-1260	586	32	.	.	PUNCT
fuelectenerg-1260	587	1	41	41	NUM
fuelectenerg-1260	587	2	-	-	SYM
fuelectenerg-1260	587	3	50	50	NUM
fuelectenerg-1260	587	4	,	,	PUNCT
fuelectenerg-1260	587	5	2008	2008	NUM
fuelectenerg-1260	587	6	.	.	PUNCT
fuelectenerg-1260	588	1	[	[	X
fuelectenerg-1260	588	2	8	8	NUM
fuelectenerg-1260	588	3	]	]	X
fuelectenerg-1260	588	4	m.	m.	NOUN
fuelectenerg-1260	588	5	rieth	rieth	PROPN
fuelectenerg-1260	588	6	,	,	PUNCT
fuelectenerg-1260	588	7	nano	nano	NOUN
fuelectenerg-1260	588	8	engineering	engineering	NOUN
fuelectenerg-1260	588	9	in	in	ADP
fuelectenerg-1260	588	10	science	science	NOUN
fuelectenerg-1260	588	11	and	and	CCONJ
fuelectenerg-1260	588	12	technology	technology	NOUN
fuelectenerg-1260	588	13	–	–	PUNCT
fuelectenerg-1260	588	14	an	an	DET
fuelectenerg-1260	588	15	introduction	introduction	NOUN
fuelectenerg-1260	588	16	to	to	ADP
fuelectenerg-1260	588	17	the	the	DET
fuelectenerg-1260	588	18	world	world	NOUN
fuelectenerg-1260	588	19	of	of	ADP
fuelectenerg-1260	588	20	nano	nano	NOUN
fuelectenerg-1260	588	21	design	design	NOUN
fuelectenerg-1260	588	22	,	,	PUNCT
fuelectenerg-1260	588	23	world	world	NOUN
fuelectenerg-1260	588	24	scientific	scientific	ADJ
fuelectenerg-1260	588	25	publishing	publishing	NOUN
fuelectenerg-1260	588	26	,	,	PUNCT
fuelectenerg-1260	588	27	series	series	NOUN
fuelectenerg-1260	588	28	on	on	ADP
fuelectenerg-1260	588	29	the	the	DET
fuelectenerg-1260	588	30	foundations	foundation	NOUN
fuelectenerg-1260	588	31	of	of	ADP
fuelectenerg-1260	588	32	natural	natural	ADJ
fuelectenerg-1260	588	33	sciende	sciende	NOUN
fuelectenerg-1260	588	34	and	and	CCONJ
fuelectenerg-1260	588	35	technology	technology	NOUN
fuelectenerg-1260	588	36	,	,	PUNCT
fuelectenerg-1260	588	37	vol	vol	NOUN
fuelectenerg-1260	588	38	.	.	PROPN
fuelectenerg-1260	588	39	6	6	NUM
fuelectenerg-1260	588	40	,	,	PUNCT
fuelectenerg-1260	588	41	2003	2003	NUM
fuelectenerg-1260	588	42	,	,	PUNCT
fuelectenerg-1260	588	43	rep	rep	PROPN
fuelectenerg-1260	588	44	2006	2006	NUM
fuelectenerg-1260	588	45	isbn	isbn	NOUN
fuelectenerg-1260	588	46	981	981	NUM
fuelectenerg-1260	588	47	-	-	SYM
fuelectenerg-1260	588	48	238	238	NUM
fuelectenerg-1260	588	49	-	-	PUNCT
fuelectenerg-1260	588	50	073	073	NUM
fuelectenerg-1260	588	51	-	-	SYM
fuelectenerg-1260	588	52	6	6	NUM
fuelectenerg-1260	588	53	[	[	SYM
fuelectenerg-1260	588	54	9	9	NUM
fuelectenerg-1260	588	55	]	]	SYM
fuelectenerg-1260	588	56	http://www.fsrm.ch/	http://www.fsrm.ch/	NUM
fuelectenerg-1260	588	57	(	(	PUNCT
fuelectenerg-1260	588	58	aug	aug	PROPN
fuelectenerg-1260	588	59	.	.	PROPN
fuelectenerg-1260	588	60	2015	2015	NUM
fuelectenerg-1260	588	61	)	)	PUNCT
fuelectenerg-1260	589	1	[	[	X
fuelectenerg-1260	589	2	10	10	NUM
fuelectenerg-1260	589	3	]	]	X
fuelectenerg-1260	589	4	http://www2.imec.be/	http://www2.imec.be/	NOUN
fuelectenerg-1260	589	5	(	(	PUNCT
fuelectenerg-1260	589	6	aug	aug	PROPN
fuelectenerg-1260	589	7	.	.	NOUN
fuelectenerg-1260	589	8	2015	2015	NUM
fuelectenerg-1260	590	1	[	[	X
fuelectenerg-1260	590	2	11	11	NUM
fuelectenerg-1260	590	3	]	]	PUNCT
fuelectenerg-1260	590	4	https://www.ieee.org/index.html	https://www.ieee.org/index.html	PROPN
fuelectenerg-1260	590	5	(	(	PUNCT
fuelectenerg-1260	590	6	aug	aug	PROPN
fuelectenerg-1260	590	7	.	.	PROPN
fuelectenerg-1260	590	8	2015	2015	NUM
fuelectenerg-1260	590	9	)	)	PUNCT
fuelectenerg-1260	591	1	[	[	X
fuelectenerg-1260	591	2	12	12	NUM
fuelectenerg-1260	591	3	]	]	PUNCT
fuelectenerg-1260	591	4	http://ecd.eurotraining.net/	http://ecd.eurotraining.net/	NOUN
fuelectenerg-1260	591	5	(	(	PUNCT
fuelectenerg-1260	591	6	aug	aug	PROPN
fuelectenerg-1260	591	7	.	.	PROPN
fuelectenerg-1260	591	8	2015	2015	NUM
fuelectenerg-1260	591	9	)	)	PUNCT
fuelectenerg-1260	592	1	[	[	X
fuelectenerg-1260	592	2	13	13	NUM
fuelectenerg-1260	592	3	]	]	X
fuelectenerg-1260	592	4	u.	u.	NOUN
fuelectenerg-1260	592	5	mastromatteo	mastromatteo	PROPN
fuelectenerg-1260	592	6	and	and	CCONJ
fuelectenerg-1260	592	7	b	b	ADJ
fuelectenerg-1260	592	8	murari	murari	NOUN
fuelectenerg-1260	592	9	“	"	PUNCT
fuelectenerg-1260	592	10	new	new	ADJ
fuelectenerg-1260	592	11	architecture	architecture	NOUN
fuelectenerg-1260	592	12	in	in	ADP
fuelectenerg-1260	592	13	designing	design	VERB
fuelectenerg-1260	592	14	microsystems	microsystem	NOUN
fuelectenerg-1260	592	15	”	"	PUNCT
fuelectenerg-1260	592	16	in	in	ADP
fuelectenerg-1260	592	17	proceedings	proceeding	NOUN
fuelectenerg-1260	592	18	of	of	ADP
fuelectenerg-1260	592	19	the	the	DET
fuelectenerg-1260	592	20	7th	7th	ADJ
fuelectenerg-1260	592	21	italian	italian	ADJ
fuelectenerg-1260	592	22	conference	conference	NOUN
fuelectenerg-1260	592	23	s	s	PART
fuelectenerg-1260	592	24	ensors	ensor	NOUN
fuelectenerg-1260	592	25	and	and	CCONJ
fuelectenerg-1260	592	26	microsystems	microsystem	NOUN
fuelectenerg-1260	592	27	,	,	PUNCT
fuelectenerg-1260	592	28	bologna	bologna	PROPN
fuelectenerg-1260	592	29	,	,	PUNCT
fuelectenerg-1260	592	30	italy	italy	PROPN
fuelectenerg-1260	592	31	,	,	PUNCT
fuelectenerg-1260	592	32	february	february	PROPN
fuelectenerg-1260	592	33	2002	2002	NUM
fuelectenerg-1260	592	34	,	,	PUNCT
fuelectenerg-1260	592	35	pp	pp	ADJ
fuelectenerg-1260	592	36	.	.	PUNCT
fuelectenerg-1260	593	1	94	94	NUM
fuelectenerg-1260	593	2	-	-	SYM
fuelectenerg-1260	593	3	98	98	NUM
fuelectenerg-1260	593	4	4	4	NUM
fuelectenerg-1260	593	5	–	–	PUNCT
fuelectenerg-1260	593	6	6	6	NUM
fuelectenerg-1260	593	7	[	[	SYM
fuelectenerg-1260	593	8	14	14	NUM
fuelectenerg-1260	593	9	]	]	X
fuelectenerg-1260	593	10	s.	s.	PROPN
fuelectenerg-1260	593	11	m.	m.	PROPN
fuelectenerg-1260	593	12	spearing	spearing	PROPN
fuelectenerg-1260	593	13	,	,	PUNCT
fuelectenerg-1260	593	14	acta	acta	PROPN
fuelectenerg-1260	593	15	materialia	materialia	PROPN
fuelectenerg-1260	593	16	,	,	PUNCT
fuelectenerg-1260	593	17	vol	vol	NOUN
fuelectenerg-1260	593	18	.	.	PROPN
fuelectenerg-1260	593	19	48	48	NUM
fuelectenerg-1260	593	20	,	,	PUNCT
fuelectenerg-1260	593	21	issue	issue	NOUN
fuelectenerg-1260	593	22	1	1	NUM
fuelectenerg-1260	593	23	,	,	PUNCT
fuelectenerg-1260	593	24	pp	pp	ADJ
fuelectenerg-1260	593	25	.	.	PUNCT
fuelectenerg-1260	594	1	179	179	NUM
fuelectenerg-1260	594	2	-	-	SYM
fuelectenerg-1260	594	3	196	196	NUM
fuelectenerg-1260	594	4	,	,	PUNCT
fuelectenerg-1260	594	5	1	1	NUM
fuelectenerg-1260	594	6	january	january	NOUN
fuelectenerg-1260	594	7	2000	2000	NUM
fuelectenerg-1260	595	1	[	[	X
fuelectenerg-1260	595	2	15	15	NUM
fuelectenerg-1260	595	3	]	]	X
fuelectenerg-1260	595	4	s.	s.	PROPN
fuelectenerg-1260	595	5	d.	d.	PROPN
fuelectenerg-1260	595	6	senturia	senturia	PROPN
fuelectenerg-1260	595	7	,	,	PUNCT
fuelectenerg-1260	595	8	microsystem	microsystem	NOUN
fuelectenerg-1260	595	9	design	design	NOUN
fuelectenerg-1260	595	10	,	,	PUNCT
fuelectenerg-1260	595	11	kluwer	kluwer	NOUN
fuelectenerg-1260	595	12	academic	academic	ADJ
fuelectenerg-1260	595	13	publishers	publisher	NOUN
fuelectenerg-1260	595	14	,	,	PUNCT
fuelectenerg-1260	595	15	boston	boston	PROPN
fuelectenerg-1260	595	16	2001	2001	NUM
fuelectenerg-1260	595	17	[	[	X
fuelectenerg-1260	595	18	16	16	NUM
fuelectenerg-1260	595	19	]	]	X
fuelectenerg-1260	595	20	j.a	j.a	PROPN
fuelectenerg-1260	595	21	.	.	PROPN
fuelectenerg-1260	595	22	pelesko,.d.h	pelesko,.d.h	PROPN
fuelectenerg-1260	595	23	.	.	PUNCT
fuelectenerg-1260	596	1	bernstein	bernstein	PROPN
fuelectenerg-1260	596	2	,	,	PUNCT
fuelectenerg-1260	596	3	modelling	model	VERB
fuelectenerg-1260	596	4	mems	mem	NOUN
fuelectenerg-1260	596	5	and	and	CCONJ
fuelectenerg-1260	596	6	nems	nem	NOUN
fuelectenerg-1260	596	7	,	,	PUNCT
fuelectenerg-1260	596	8	chapman	chapman	PROPN
fuelectenerg-1260	596	9	&	&	CCONJ
fuelectenerg-1260	596	10	hall	hall	PROPN
fuelectenerg-1260	596	11	/	/	SYM
fuelectenerg-1260	596	12	crc	crc	PROPN
fuelectenerg-1260	596	13	,	,	PUNCT
fuelectenerg-1260	596	14	2003	2003	NUM
fuelectenerg-1260	596	15	.	.	PUNCT
fuelectenerg-1260	597	1	[	[	X
fuelectenerg-1260	597	2	17	17	NUM
fuelectenerg-1260	597	3	]	]	PUNCT
fuelectenerg-1260	597	4	t.fukuda	t.fukuda	NOUN
fuelectenerg-1260	597	5	,	,	PUNCT
fuelectenerg-1260	597	6	w.	w.	PROPN
fuelectenerg-1260	597	7	menz	menz	PROPN
fuelectenerg-1260	597	8	,	,	PUNCT
fuelectenerg-1260	597	9	micro	micro	ADJ
fuelectenerg-1260	597	10	mechanical	mechanical	ADJ
fuelectenerg-1260	597	11	systems	system	NOUN
fuelectenerg-1260	597	12	,	,	PUNCT
fuelectenerg-1260	597	13	principles	principle	NOUN
fuelectenerg-1260	597	14	and	and	CCONJ
fuelectenerg-1260	597	15	technology	technology	NOUN
fuelectenerg-1260	597	16	,	,	PUNCT
fuelectenerg-1260	597	17	elsevier	elsevier	NOUN
fuelectenerg-1260	597	18	1998	1998	NUM
fuelectenerg-1260	597	19	.	.	PUNCT
fuelectenerg-1260	598	1	[	[	X
fuelectenerg-1260	598	2	18	18	NUM
fuelectenerg-1260	598	3	]	]	X
fuelectenerg-1260	598	4	p.rai	p.rai	PROPN
fuelectenerg-1260	598	5	-	-	PUNCT
fuelectenerg-1260	598	6	choudhury	choudhury	PROPN
fuelectenerg-1260	598	7	(	(	PUNCT
fuelectenerg-1260	598	8	ed	ed	NOUN
fuelectenerg-1260	598	9	.	.	PUNCT
fuelectenerg-1260	598	10	)	)	PUNCT
fuelectenerg-1260	599	1	handbook	handbook	NOUN
fuelectenerg-1260	599	2	of	of	ADP
fuelectenerg-1260	599	3	microlithography	microlithography	NOUN
fuelectenerg-1260	599	4	,	,	PUNCT
fuelectenerg-1260	599	5	micromachining	micromachining	NOUN
fuelectenerg-1260	599	6	and	and	CCONJ
fuelectenerg-1260	599	7	microfabrication	microfabrication	NOUN
fuelectenerg-1260	599	8	,	,	PUNCT
fuelectenerg-1260	599	9	vol	vol	NOUN
fuelectenerg-1260	599	10	.	.	PROPN
fuelectenerg-1260	599	11	1	1	NUM
fuelectenerg-1260	599	12	,	,	PUNCT
fuelectenerg-1260	599	13	microlithography	microlithography	NOUN
fuelectenerg-1260	599	14	,	,	PUNCT
fuelectenerg-1260	599	15	1997	1997	NUM
fuelectenerg-1260	599	16	,	,	PUNCT
fuelectenerg-1260	599	17	spie	spie	ADJ
fuelectenerg-1260	599	18	optical	optical	ADJ
fuelectenerg-1260	599	19	engineering	engineering	NOUN
fuelectenerg-1260	599	20	press	press	NOUN
fuelectenerg-1260	599	21	.	.	PUNCT
fuelectenerg-1260	600	1	[	[	X
fuelectenerg-1260	600	2	19	19	NUM
fuelectenerg-1260	600	3	]	]	X
fuelectenerg-1260	600	4	p.rai	p.rai	PROPN
fuelectenerg-1260	600	5	-	-	PUNCT
fuelectenerg-1260	600	6	choudhury	choudhury	PROPN
fuelectenerg-1260	600	7	(	(	PUNCT
fuelectenerg-1260	600	8	ed	ed	NOUN
fuelectenerg-1260	600	9	.	.	PUNCT
fuelectenerg-1260	600	10	)	)	PUNCT
fuelectenerg-1260	601	1	handbook	handbook	NOUN
fuelectenerg-1260	601	2	of	of	ADP
fuelectenerg-1260	601	3	microlithography	microlithography	NOUN
fuelectenerg-1260	601	4	,	,	PUNCT
fuelectenerg-1260	601	5	micromachining	micromachining	NOUN
fuelectenerg-1260	601	6	and	and	CCONJ
fuelectenerg-1260	601	7	microfabrication	microfabrication	NOUN
fuelectenerg-1260	601	8	,	,	PUNCT
fuelectenerg-1260	601	9	vol	vol	NOUN
fuelectenerg-1260	601	10	.	.	PROPN
fuelectenerg-1260	601	11	2	2	NUM
fuelectenerg-1260	601	12	,	,	PUNCT
fuelectenerg-1260	601	13	micromachining	micromachining	NOUN
fuelectenerg-1260	601	14	and	and	CCONJ
fuelectenerg-1260	601	15	microfabrication	microfabrication	NOUN
fuelectenerg-1260	601	16	,	,	PUNCT
fuelectenerg-1260	601	17	1997	1997	NUM
fuelectenerg-1260	601	18	,	,	PUNCT
fuelectenerg-1260	601	19	spie	spie	ADJ
fuelectenerg-1260	601	20	optical	optical	ADJ
fuelectenerg-1260	601	21	engineering	engineering	NOUN
fuelectenerg-1260	601	22	press	press	NOUN
fuelectenerg-1260	601	23	.	.	PUNCT
fuelectenerg-1260	602	1	[	[	X
fuelectenerg-1260	602	2	20	20	NUM
fuelectenerg-1260	602	3	]	]	X
fuelectenerg-1260	602	4	g.k	g.k	PROPN
fuelectenerg-1260	602	5	.	.	PROPN
fuelectenerg-1260	602	6	fedder	fedder	PROPN
fuelectenerg-1260	602	7	,	,	PUNCT
fuelectenerg-1260	602	8	mems	mem	NOUN
fuelectenerg-1260	602	9	fabrication	fabrication	NOUN
fuelectenerg-1260	602	10	,	,	PUNCT
fuelectenerg-1260	602	11	proceedings	proceeding	NOUN
fuelectenerg-1260	602	12	ieee	ieee	VERB
fuelectenerg-1260	602	13	international	international	ADJ
fuelectenerg-1260	602	14	test	test	NOUN
fuelectenerg-1260	602	15	conference	conference	NOUN
fuelectenerg-1260	602	16	,	,	PUNCT
fuelectenerg-1260	602	17	itc	itc	PROPN
fuelectenerg-1260	602	18	,	,	PUNCT
fuelectenerg-1260	602	19	2003	2003	NUM
fuelectenerg-1260	602	20	,	,	PUNCT
fuelectenerg-1260	602	21	pp	pp	ADV
fuelectenerg-1260	602	22	.	.	PUNCT
fuelectenerg-1260	603	1	691	691	NUM
fuelectenerg-1260	603	2	698	698	NUM
fuelectenerg-1260	603	3	[	[	X
fuelectenerg-1260	603	4	21	21	NUM
fuelectenerg-1260	603	5	]	]	PUNCT
fuelectenerg-1260	603	6	k.subramanian	k.subramanian	ADJ
fuelectenerg-1260	603	7	,	,	PUNCT
fuelectenerg-1260	603	8	micro	micro	X
fuelectenerg-1260	603	9	electro	electro	VERB
fuelectenerg-1260	603	10	mechanical	mechanical	ADJ
fuelectenerg-1260	603	11	systems	system	NOUN
fuelectenerg-1260	603	12	a	a	DET
fuelectenerg-1260	603	13	design	design	NOUN
fuelectenerg-1260	603	14	approach	approach	NOUN
fuelectenerg-1260	603	15	,	,	PUNCT
fuelectenerg-1260	603	16	springer	springer	NOUN
fuelectenerg-1260	603	17	-	-	PUNCT
fuelectenerg-1260	603	18	verlag	verlag	PROPN
fuelectenerg-1260	603	19	,	,	PUNCT
fuelectenerg-1260	603	20	2010	2010	NUM
fuelectenerg-1260	603	21	.	.	PUNCT
fuelectenerg-1260	604	1	[	[	X
fuelectenerg-1260	604	2	22	22	NUM
fuelectenerg-1260	604	3	]	]	PUNCT
fuelectenerg-1260	604	4	y.	y.	PROPN
fuelectenerg-1260	604	5	zhu	zhu	PROPN
fuelectenerg-1260	604	6	,	,	PUNCT
fuelectenerg-1260	604	7	a.	a.	NOUN
fuelectenerg-1260	604	8	bazaei	bazaei	NOUN
fuelectenerg-1260	604	9	,	,	PUNCT
fuelectenerg-1260	604	10	s.o.r	s.o.r	NOUN
fuelectenerg-1260	604	11	.	.	PUNCT
fuelectenerg-1260	605	1	moheimani	moheimani	PROPN
fuelectenerg-1260	605	2	,	,	PUNCT
fuelectenerg-1260	605	3	m.r	m.r	PROPN
fuelectenerg-1260	605	4	.	.	PROPN
fuelectenerg-1260	605	5	yuce	yuce	PROPN
fuelectenerg-1260	605	6	,	,	PUNCT
fuelectenerg-1260	605	7	“	"	PUNCT
fuelectenerg-1260	605	8	design	design	NOUN
fuelectenerg-1260	605	9	,	,	PUNCT
fuelectenerg-1260	605	10	prototyping	prototyping	NOUN
fuelectenerg-1260	605	11	,	,	PUNCT
fuelectenerg-1260	605	12	modelling	modelling	NOUN
fuelectenerg-1260	605	13	and	and	CCONJ
fuelectenerg-1260	605	14	control	control	NOUN
fuelectenerg-1260	605	15	of	of	ADP
fuelectenerg-1260	605	16	a	a	DET
fuelectenerg-1260	605	17	mems	mem	NOUN
fuelectenerg-1260	605	18	nanopositioning	nanopositione	VERB
fuelectenerg-1260	605	19	stage	stage	NOUN
fuelectenerg-1260	605	20	”	"	PUNCT
fuelectenerg-1260	605	21	,	,	PUNCT
fuelectenerg-1260	605	22	in	in	ADP
fuelectenerg-1260	605	23	proceedings	proceeding	NOUN
fuelectenerg-1260	605	24	of	of	ADP
fuelectenerg-1260	605	25	the	the	DET
fuelectenerg-1260	605	26	ieee	ieee	NOUN
fuelectenerg-1260	605	27	american	american	PROPN
fuelectenerg-1260	605	28	control	control	PROPN
fuelectenerg-1260	605	29	conference	conference	PROPN
fuelectenerg-1260	605	30	,	,	PUNCT
fuelectenerg-1260	605	31	san	san	PROPN
fuelectenerg-1260	605	32	francisco	francisco	PROPN
fuelectenerg-1260	605	33	,	,	PUNCT
fuelectenerg-1260	605	34	ca	ca	PROPN
fuelectenerg-1260	605	35	,	,	PUNCT
fuelectenerg-1260	605	36	usa	usa	PROPN
fuelectenerg-1260	605	37	,	,	PUNCT
fuelectenerg-1260	605	38	2011	2011	NUM
fuelectenerg-1260	605	39	,	,	PUNCT
fuelectenerg-1260	605	40	pp	pp	ADP
fuelectenerg-1260	605	41	2278	2278	NUM
fuelectenerg-1260	605	42	-	-	SYM
fuelectenerg-1260	605	43	2283	2283	NUM
fuelectenerg-1260	605	44	.	.	PUNCT
fuelectenerg-1260	606	1	[	[	X
fuelectenerg-1260	606	2	23	23	NUM
fuelectenerg-1260	606	3	]	]	PUNCT
fuelectenerg-1260	606	4	j.	j.	PROPN
fuelectenerg-1260	606	5	haneveld	haneveld	PROPN
fuelectenerg-1260	606	6	,	,	PUNCT
fuelectenerg-1260	606	7	“	"	PUNCT
fuelectenerg-1260	606	8	nanochannel	nanochannel	NOUN
fuelectenerg-1260	606	9	fabrication	fabrication	NOUN
fuelectenerg-1260	606	10	and	and	CCONJ
fuelectenerg-1260	606	11	characteristic	characteristic	ADJ
fuelectenerg-1260	606	12	using	use	VERB
fuelectenerg-1260	606	13	bond	bond	NOUN
fuelectenerg-1260	606	14	micromachining	micromachining	NOUN
fuelectenerg-1260	606	15	”	"	PUNCT
fuelectenerg-1260	606	16	,	,	PUNCT
fuelectenerg-1260	606	17	phd	phd	NOUN
fuelectenerg-1260	606	18	thesis	thesis	NOUN
fuelectenerg-1260	606	19	,	,	PUNCT
fuelectenerg-1260	606	20	2006	2006	NUM
fuelectenerg-1260	606	21	,	,	PUNCT
fuelectenerg-1260	606	22	university	university	PROPN
fuelectenerg-1260	606	23	of	of	ADP
fuelectenerg-1260	606	24	twente	twente	PROPN
fuelectenerg-1260	606	25	,	,	PUNCT
fuelectenerg-1260	606	26	enschede	enschede	PROPN
fuelectenerg-1260	606	27	,	,	PUNCT
fuelectenerg-1260	606	28	the	the	DET
fuelectenerg-1260	606	29	netherlands	netherlands	PROPN
fuelectenerg-1260	606	30	.	.	PUNCT
fuelectenerg-1260	607	1	[	[	X
fuelectenerg-1260	607	2	24	24	NUM
fuelectenerg-1260	607	3	]	]	X
fuelectenerg-1260	607	4	g.	g.	PROPN
fuelectenerg-1260	607	5	menozzi	menozzi	PROPN
fuelectenerg-1260	607	6	“	"	PUNCT
fuelectenerg-1260	607	7	nexus	nexus	PROPN
fuelectenerg-1260	607	8	&	&	CCONJ
fuelectenerg-1260	607	9	eurimus	eurimus	PROPN
fuelectenerg-1260	607	10	:	:	PUNCT
fuelectenerg-1260	607	11	two	two	NUM
fuelectenerg-1260	607	12	major	major	ADJ
fuelectenerg-1260	607	13	initiatives	initiative	NOUN
fuelectenerg-1260	607	14	to	to	PART
fuelectenerg-1260	607	15	support	support	VERB
fuelectenerg-1260	607	16	r&d	r&d	NOUN
fuelectenerg-1260	607	17	and	and	CCONJ
fuelectenerg-1260	607	18	strengthen	strengthen	VERB
fuelectenerg-1260	607	19	european	european	ADJ
fuelectenerg-1260	607	20	mems	mems	PROPN
fuelectenerg-1260	607	21	industry	industry	NOUN
fuelectenerg-1260	607	22	”	"	PUNCT
fuelectenerg-1260	607	23	.	.	PUNCT
fuelectenerg-1260	608	1	sensors	sensor	NOUN
fuelectenerg-1260	608	2	and	and	CCONJ
fuelectenerg-1260	608	3	microsystems	microsystem	NOUN
fuelectenerg-1260	608	4	,	,	PUNCT
fuelectenerg-1260	608	5	pp	pp	ADJ
fuelectenerg-1260	608	6	.	.	PUNCT
fuelectenerg-1260	609	1	13	13	NUM
fuelectenerg-1260	609	2	-	-	SYM
fuelectenerg-1260	609	3	29	29	NUM
fuelectenerg-1260	609	4	,	,	PUNCT
fuelectenerg-1260	609	5	2002	2002	NUM
fuelectenerg-1260	609	6	.	.	PUNCT
fuelectenerg-1260	610	1	[	[	X
fuelectenerg-1260	610	2	25	25	NUM
fuelectenerg-1260	610	3	]	]	PUNCT
fuelectenerg-1260	610	4	j.-p	j.-p	PROPN
fuelectenerg-1260	610	5	.	.	PUNCT
fuelectenerg-1260	611	1	desbiens	desbien	NOUN
fuelectenerg-1260	611	2	,	,	PUNCT
fuelectenerg-1260	611	3	p.	p.	PROPN
fuelectenerg-1260	611	4	masson	masson	PROPN
fuelectenerg-1260	611	5	,	,	PUNCT
fuelectenerg-1260	611	6	“	"	PUNCT
fuelectenerg-1260	611	7	arf	arf	NOUN
fuelectenerg-1260	611	8	excimer	excimer	NOUN
fuelectenerg-1260	611	9	laser	laser	NOUN
fuelectenerg-1260	611	10	micromachining	micromachining	NOUN
fuelectenerg-1260	611	11	of	of	ADP
fuelectenerg-1260	611	12	pyrex	pyrex	NOUN
fuelectenerg-1260	611	13	,	,	PUNCT
fuelectenerg-1260	611	14	sic	sic	ADJ
fuelectenerg-1260	611	15	and	and	CCONJ
fuelectenerg-1260	611	16	pzt	pzt	VERB
fuelectenerg-1260	611	17	for	for	ADP
fuelectenerg-1260	611	18	rapid	rapid	ADJ
fuelectenerg-1260	611	19	prototyping	prototyping	NOUN
fuelectenerg-1260	611	20	of	of	ADP
fuelectenerg-1260	611	21	mems	mems	ADJ
fuelectenerg-1260	611	22	components	component	NOUN
fuelectenerg-1260	611	23	”	"	PUNCT
fuelectenerg-1260	611	24	,	,	PUNCT
fuelectenerg-1260	611	25	sensors	sensor	NOUN
fuelectenerg-1260	611	26	and	and	CCONJ
fuelectenerg-1260	611	27	actuators	actuator	NOUN
fuelectenerg-1260	611	28	a	a	DET
fuelectenerg-1260	611	29	136	136	NUM
fuelectenerg-1260	611	30	,	,	PUNCT
fuelectenerg-1260	611	31	554–563	554–563	NUM
fuelectenerg-1260	611	32	,	,	PUNCT
fuelectenerg-1260	611	33	2007	2007	NUM
fuelectenerg-1260	611	34	.	.	PUNCT
fuelectenerg-1260	612	1	[	[	X
fuelectenerg-1260	612	2	26	26	NUM
fuelectenerg-1260	612	3	]	]	X
fuelectenerg-1260	612	4	r.	r.	PROPN
fuelectenerg-1260	612	5	delille	delille	PROPN
fuelectenerg-1260	612	6	,	,	PUNCT
fuelectenerg-1260	612	7	m.g	m.g	PROPN
fuelectenerg-1260	612	8	.	.	PROPN
fuelectenerg-1260	612	9	urdaneta	urdaneta	PROPN
fuelectenerg-1260	612	10	,	,	PUNCT
fuelectenerg-1260	612	11	s.j	s.j	PROPN
fuelectenerg-1260	612	12	.	.	PROPN
fuelectenerg-1260	612	13	moseley	moseley	PROPN
fuelectenerg-1260	612	14	,	,	PUNCT
fuelectenerg-1260	612	15	e.smela	e.smela	VERB
fuelectenerg-1260	612	16	,	,	PUNCT
fuelectenerg-1260	612	17	“	"	PUNCT
fuelectenerg-1260	612	18	benchtop	benchtop	NOUN
fuelectenerg-1260	612	19	polymer	polymer	NOUN
fuelectenerg-1260	612	20	mems	mem	NOUN
fuelectenerg-1260	612	21	”	"	PUNCT
fuelectenerg-1260	612	22	,	,	PUNCT
fuelectenerg-1260	612	23	journal	journal	NOUN
fuelectenerg-1260	612	24	of	of	ADP
fuelectenerg-1260	612	25	microelectromechanical	microelectromechanical	ADJ
fuelectenerg-1260	612	26	systems	system	NOUN
fuelectenerg-1260	612	27	,	,	PUNCT
fuelectenerg-1260	612	28	vol	vol	NOUN
fuelectenerg-1260	612	29	.	.	PROPN
fuelectenerg-1260	612	30	15	15	NUM
fuelectenerg-1260	612	31	,	,	PUNCT
fuelectenerg-1260	612	32	no	no	INTJ
fuelectenerg-1260	612	33	.	.	NOUN
fuelectenerg-1260	612	34	5	5	NUM
fuelectenerg-1260	612	35	,	,	PUNCT
fuelectenerg-1260	612	36	pp	pp	ADJ
fuelectenerg-1260	612	37	.	.	PUNCT
fuelectenerg-1260	613	1	1108	1108	NUM
fuelectenerg-1260	613	2	-	-	SYM
fuelectenerg-1260	613	3	1120	1120	NUM
fuelectenerg-1260	613	4	,	,	PUNCT
fuelectenerg-1260	613	5	october	october	PROPN
fuelectenerg-1260	613	6	2006	2006	NUM
fuelectenerg-1260	613	7	.	.	PUNCT
fuelectenerg-1260	614	1	http://www.fsrm.ch/	http://www.fsrm.ch/	NUM
fuelectenerg-1260	614	2	http://www2.imec.be/	http://www2.imec.be/	NOUN
fuelectenerg-1260	614	3	https://www.ieee.org/index.html	https://www.ieee.org/index.html	PROPN
fuelectenerg-1260	614	4	http://ecd.eurotraining.net/	http://ecd.eurotraining.net/	VERB
fuelectenerg-1260	614	5	32	32	NUM
fuelectenerg-1260	614	6	r.	r.	PROPN
fuelectenerg-1260	614	7	sitte	sitte	PROPN
fuelectenerg-1260	615	1	[	[	X
fuelectenerg-1260	615	2	27	27	NUM
fuelectenerg-1260	615	3	]	]	SYM
fuelectenerg-1260	615	4	k.iniewski	k.iniewski	PROPN
fuelectenerg-1260	615	5	,	,	PUNCT
fuelectenerg-1260	615	6	s.	s.	PROPN
fuelectenerg-1260	615	7	sriram	sriram	PROPN
fuelectenerg-1260	615	8	,	,	PUNCT
fuelectenerg-1260	615	9	m.	m.	NOUN
fuelectenerg-1260	615	10	bhaskaran	bhaskaran	NOUN
fuelectenerg-1260	615	11	,	,	PUNCT
fuelectenerg-1260	615	12	energy	energy	NOUN
fuelectenerg-1260	615	13	harvesting	harvesting	NOUN
fuelectenerg-1260	615	14	with	with	ADP
fuelectenerg-1260	615	15	functional	functional	ADJ
fuelectenerg-1260	615	16	materials	material	NOUN
fuelectenerg-1260	615	17	and	and	CCONJ
fuelectenerg-1260	615	18	microsystems	microsystem	NOUN
fuelectenerg-1260	615	19	,	,	PUNCT
fuelectenerg-1260	615	20	crc	crc	NOUN
fuelectenerg-1260	615	21	press	press	NOUN
fuelectenerg-1260	615	22	,	,	PUNCT
fuelectenerg-1260	615	23	2014	2014	NUM
fuelectenerg-1260	615	24	,	,	PUNCT
fuelectenerg-1260	615	25	taylor	taylor	PROPN
fuelectenerg-1260	615	26	&	&	CCONJ
fuelectenerg-1260	615	27	francis	francis	PROPN
fuelectenerg-1260	615	28	group	group	PROPN
fuelectenerg-1260	615	29	.	.	PUNCT
fuelectenerg-1260	616	1	[	[	X
fuelectenerg-1260	616	2	28	28	NUM
fuelectenerg-1260	616	3	]	]	X
fuelectenerg-1260	616	4	s.	s.	PROPN
fuelectenerg-1260	616	5	bermejo	bermejo	PROPN
fuelectenerg-1260	616	6	,	,	PUNCT
fuelectenerg-1260	616	7	l.	l.	PROPN
fuelectenerg-1260	616	8	castañer	castañer	PROPN
fuelectenerg-1260	616	9	,	,	PUNCT
fuelectenerg-1260	616	10	“	"	PUNCT
fuelectenerg-1260	616	11	dynamics	dynamic	NOUN
fuelectenerg-1260	616	12	of	of	ADP
fuelectenerg-1260	616	13	mems	mem	NOUN
fuelectenerg-1260	616	14	electrostatic	electrostatic	ADJ
fuelectenerg-1260	616	15	driving	driving	NOUN
fuelectenerg-1260	616	16	using	use	VERB
fuelectenerg-1260	616	17	a	a	DET
fuelectenerg-1260	616	18	photovoltaic	photovoltaic	NOUN
fuelectenerg-1260	616	19	source	source	NOUN
fuelectenerg-1260	616	20	”	"	PUNCT
fuelectenerg-1260	616	21	,	,	PUNCT
fuelectenerg-1260	616	22	sensors	sensor	NOUN
fuelectenerg-1260	616	23	and	and	CCONJ
fuelectenerg-1260	616	24	actuators	actuator	NOUN
fuelectenerg-1260	616	25	a	a	DET
fuelectenerg-1260	616	26	:	:	PUNCT
fuelectenerg-1260	616	27	physical	physical	ADJ
fuelectenerg-1260	616	28	,	,	PUNCT
fuelectenerg-1260	616	29	vol	vol	NOUN
fuelectenerg-1260	616	30	.	.	PROPN
fuelectenerg-1260	616	31	121	121	NUM
fuelectenerg-1260	616	32	,	,	PUNCT
fuelectenerg-1260	616	33	issue	issue	NOUN
fuelectenerg-1260	616	34	1	1	NUM
fuelectenerg-1260	616	35	,	,	PUNCT
fuelectenerg-1260	616	36	pages	page	NOUN
fuelectenerg-1260	616	37	237–242	237–242	NUM
fuelectenerg-1260	616	38	,	,	PUNCT
fuelectenerg-1260	616	39	31	31	NUM
fuelectenerg-1260	616	40	may	may	PROPN
fuelectenerg-1260	616	41	2005	2005	NUM
fuelectenerg-1260	616	42	.	.	PUNCT
fuelectenerg-1260	617	1	[	[	X
fuelectenerg-1260	617	2	29	29	NUM
fuelectenerg-1260	617	3	]	]	PUNCT
fuelectenerg-1260	617	4	a.	a.	NOUN
fuelectenerg-1260	617	5	napieralski	napieralski	PROPN
fuelectenerg-1260	617	6	,	,	PUNCT
fuelectenerg-1260	617	7	m.	m.	NOUN
fuelectenerg-1260	617	8	napieralska	napieralska	PROPN
fuelectenerg-1260	617	9	,	,	PUNCT
fuelectenerg-1260	617	10	m.szermer	m.szermer	NOUN
fuelectenerg-1260	617	11	,	,	PUNCT
fuelectenerg-1260	617	12	c.	c.	PROPN
fuelectenerg-1260	617	13	maj	maj	PROPN
fuelectenerg-1260	617	14	,	,	PUNCT
fuelectenerg-1260	617	15	“	"	PUNCT
fuelectenerg-1260	617	16	the	the	DET
fuelectenerg-1260	617	17	evolution	evolution	NOUN
fuelectenerg-1260	617	18	of	of	ADP
fuelectenerg-1260	617	19	mems	mem	NOUN
fuelectenerg-1260	617	20	and	and	CCONJ
fuelectenerg-1260	617	21	modelling	model	VERB
fuelectenerg-1260	617	22	methodologies	methodology	NOUN
fuelectenerg-1260	617	23	”	"	PUNCT
fuelectenerg-1260	617	24	,	,	PUNCT
fuelectenerg-1260	617	25	the	the	DET
fuelectenerg-1260	617	26	international	international	ADJ
fuelectenerg-1260	617	27	journal	journal	NOUN
fuelectenerg-1260	617	28	for	for	ADP
fuelectenerg-1260	617	29	computation	computation	NOUN
fuelectenerg-1260	617	30	and	and	CCONJ
fuelectenerg-1260	617	31	mathematics	mathematic	NOUN
fuelectenerg-1260	617	32	in	in	ADP
fuelectenerg-1260	617	33	electrical	electrical	ADJ
fuelectenerg-1260	617	34	and	and	CCONJ
fuelectenerg-1260	617	35	electronic	electronic	ADJ
fuelectenerg-1260	617	36	engineering	engineering	NOUN
fuelectenerg-1260	617	37	publisher	publisher	NOUN
fuelectenerg-1260	617	38	:	:	PUNCT
fuelectenerg-1260	617	39	emerald	emerald	NOUN
fuelectenerg-1260	617	40	group	group	PROPN
fuelectenerg-1260	617	41	publishing	publishing	PROPN
fuelectenerg-1260	617	42	limited	limit	VERB
fuelectenerg-1260	617	43	,	,	PUNCT
fuelectenerg-1260	617	44	vol	vol	NOUN
fuelectenerg-1260	617	45	.	.	PROPN
fuelectenerg-1260	617	46	31	31	NUM
fuelectenerg-1260	617	47	,	,	PUNCT
fuelectenerg-1260	617	48	issue	issue	NOUN
fuelectenerg-1260	617	49	5	5	NUM
fuelectenerg-1260	617	50	,	,	PUNCT
fuelectenerg-1260	617	51	pp	pp	ADJ
fuelectenerg-1260	617	52	.	.	PUNCT
fuelectenerg-1260	617	53	1458	1458	NUM
fuelectenerg-1260	617	54	–	–	PUNCT
fuelectenerg-1260	617	55	1469	1469	NUM
fuelectenerg-1260	617	56	.	.	PUNCT
fuelectenerg-1260	618	1	[	[	X
fuelectenerg-1260	618	2	30	30	NUM
fuelectenerg-1260	618	3	]	]	X
fuelectenerg-1260	618	4	mems	mem	NOUN
fuelectenerg-1260	618	5	and	and	CCONJ
fuelectenerg-1260	618	6	nems	nem	NOUN
fuelectenerg-1260	618	7	–	–	PUNCT
fuelectenerg-1260	618	8	systems	system	NOUN
fuelectenerg-1260	618	9	,	,	PUNCT
fuelectenerg-1260	618	10	devices	device	NOUN
fuelectenerg-1260	618	11	and	and	CCONJ
fuelectenerg-1260	618	12	structures	structure	NOUN
fuelectenerg-1260	618	13	,	,	PUNCT
fuelectenerg-1260	618	14	s.e	s.e	PROPN
fuelectenerg-1260	618	15	.	.	PROPN
fuelectenerg-1260	618	16	lyshevski	lyshevski	PROPN
fuelectenerg-1260	618	17	,	,	PUNCT
fuelectenerg-1260	618	18	ed	ed	NOUN
fuelectenerg-1260	618	19	.	.	PROPN
fuelectenerg-1260	618	20	,	,	PUNCT
fuelectenerg-1260	618	21	crc	crc	PROPN
fuelectenerg-1260	618	22	press	press	PROPN
fuelectenerg-1260	618	23	,	,	PUNCT
fuelectenerg-1260	618	24	2002	2002	NUM
fuelectenerg-1260	618	25	.	.	PUNCT
fuelectenerg-1260	619	1	[	[	X
fuelectenerg-1260	619	2	31	31	NUM
fuelectenerg-1260	619	3	]	]	PUNCT
fuelectenerg-1260	619	4	multiphysics	multiphysic	NOUN
fuelectenerg-1260	619	5	modelling	modelling	NOUN
fuelectenerg-1260	619	6	with	with	ADP
fuelectenerg-1260	619	7	finite	finite	ADJ
fuelectenerg-1260	619	8	elements	element	NOUN
fuelectenerg-1260	619	9	methods	method	NOUN
fuelectenerg-1260	619	10	,	,	PUNCT
fuelectenerg-1260	619	11	world	world	NOUN
fuelectenerg-1260	619	12	scientific	scientific	NOUN
fuelectenerg-1260	619	13	,	,	PUNCT
fuelectenerg-1260	619	14	series	series	NOUN
fuelectenerg-1260	619	15	on	on	ADP
fuelectenerg-1260	619	16	stability	stability	NOUN
fuelectenerg-1260	619	17	,	,	PUNCT
fuelectenerg-1260	619	18	vibration	vibration	NOUN
fuelectenerg-1260	619	19	and	and	CCONJ
fuelectenerg-1260	619	20	control	control	NOUN
fuelectenerg-1260	619	21	of	of	ADP
fuelectenerg-1260	619	22	systems	system	NOUN
fuelectenerg-1260	619	23	,	,	PUNCT
fuelectenerg-1260	619	24	w.b.j	w.b.j	PROPN
fuelectenerg-1260	619	25	.	.	PUNCT
fuelectenerg-1260	620	1	zimmermann	zimmermann	PROPN
fuelectenerg-1260	620	2	&	&	CCONJ
fuelectenerg-1260	620	3	a.	a.	PROPN
fuelectenerg-1260	620	4	guran	guran	PROPN
fuelectenerg-1260	620	5	,	,	PUNCT
fuelectenerg-1260	620	6	eds	eds	PROPN
fuelectenerg-1260	620	7	..	..	PUNCT
fuelectenerg-1260	620	8	,	,	PUNCT
fuelectenerg-1260	620	9	series	series	PROPN
fuelectenerg-1260	620	10	a.	a.	PROPN
fuelectenerg-1260	620	11	,	,	PUNCT
fuelectenerg-1260	620	12	vol	vol	NOUN
fuelectenerg-1260	620	13	.	.	PROPN
fuelectenerg-1260	620	14	18	18	NUM
fuelectenerg-1260	620	15	,	,	PUNCT
fuelectenerg-1260	620	16	2006	2006	NUM
fuelectenerg-1260	620	17	rep	rep	NOUN
fuelectenerg-1260	620	18	.	.	PROPN
fuelectenerg-1260	620	19	,	,	PUNCT
fuelectenerg-1260	620	20	2007	2007	NUM
fuelectenerg-1260	620	21	.	.	PUNCT
fuelectenerg-1260	621	1	[	[	X
fuelectenerg-1260	621	2	32	32	NUM
fuelectenerg-1260	621	3	]	]	PUNCT
fuelectenerg-1260	621	4	a.	a.	NOUN
fuelectenerg-1260	621	5	greiner	greiner	PROPN
fuelectenerg-1260	621	6	,	,	PUNCT
fuelectenerg-1260	621	7	j.	j.	PROPN
fuelectenerg-1260	621	8	lienemann	lienemann	PROPN
fuelectenerg-1260	621	9	,	,	PUNCT
fuelectenerg-1260	621	10	e.	e.	PROPN
fuelectenerg-1260	621	11	rudnyi	rudnyi	PROPN
fuelectenerg-1260	621	12	,	,	PUNCT
fuelectenerg-1260	621	13	j.	j.	PROPN
fuelectenerg-1260	621	14	g.	g.	PROPN
fuelectenerg-1260	621	15	korvink	korvink	PROPN
fuelectenerg-1260	621	16	,	,	PUNCT
fuelectenerg-1260	621	17	l.	l.	PROPN
fuelectenerg-1260	621	18	ferrario	ferrario	PROPN
fuelectenerg-1260	621	19	,	,	PUNCT
fuelectenerg-1260	621	20	m.	m.	NOUN
fuelectenerg-1260	621	21	zen	zen	PROPN
fuelectenerg-1260	621	22	“	"	PUNCT
fuelectenerg-1260	621	23	automatic	automatic	ADJ
fuelectenerg-1260	621	24	order	order	NOUN
fuelectenerg-1260	621	25	reduction	reduction	NOUN
fuelectenerg-1260	621	26	for	for	ADP
fuelectenerg-1260	621	27	finite	finite	ADJ
fuelectenerg-1260	621	28	element	element	NOUN
fuelectenerg-1260	621	29	models	model	NOUN
fuelectenerg-1260	621	30	”	"	PUNCT
fuelectenerg-1260	621	31	.	.	PUNCT
fuelectenerg-1260	622	1	sensors	sensor	NOUN
fuelectenerg-1260	622	2	and	and	CCONJ
fuelectenerg-1260	622	3	microsystems	microsystem	NOUN
fuelectenerg-1260	622	4	:	:	PUNCT
fuelectenerg-1260	622	5	pp	pp	X
fuelectenerg-1260	622	6	.	.	PUNCT
fuelectenerg-1260	623	1	411	411	NUM
fuelectenerg-1260	623	2	-	-	SYM
fuelectenerg-1260	623	3	417	417	NUM
fuelectenerg-1260	623	4	,	,	PUNCT
fuelectenerg-1260	623	5	2005	2005	NUM
fuelectenerg-1260	623	6	.	.	PUNCT
fuelectenerg-1260	624	1	[	[	X
fuelectenerg-1260	624	2	33	33	NUM
fuelectenerg-1260	624	3	]	]	X
fuelectenerg-1260	624	4	advances	advance	NOUN
fuelectenerg-1260	624	5	in	in	ADP
fuelectenerg-1260	624	6	multiphysics	multiphysics	PROPN
fuelectenerg-1260	624	7	simulation	simulation	NOUN
fuelectenerg-1260	624	8	and	and	CCONJ
fuelectenerg-1260	624	9	experimental	experimental	ADJ
fuelectenerg-1260	624	10	testing	testing	NOUN
fuelectenerg-1260	624	11	of	of	ADP
fuelectenerg-1260	624	12	mems	mem	NOUN
fuelectenerg-1260	624	13	,	,	PUNCT
fuelectenerg-1260	624	14	eds	ed	NOUN
fuelectenerg-1260	624	15	.	.	PUNCT
fuelectenerg-1260	624	16	a.	a.	NOUN
fuelectenerg-1260	624	17	frangi	frangi	PROPN
fuelectenerg-1260	624	18	,	,	PUNCT
fuelectenerg-1260	624	19	c.	c.	PROPN
fuelectenerg-1260	624	20	cercignani	cercignani	PROPN
fuelectenerg-1260	624	21	,	,	PUNCT
fuelectenerg-1260	624	22	s.	s.	PROPN
fuelectenerg-1260	624	23	mukherjee	mukherjee	PROPN
fuelectenerg-1260	624	24	,	,	PUNCT
fuelectenerg-1260	624	25	n.	n.	PROPN
fuelectenerg-1260	624	26	aluru	aluru	PROPN
fuelectenerg-1260	624	27	,	,	PUNCT
fuelectenerg-1260	624	28	computational	computational	ADJ
fuelectenerg-1260	624	29	and	and	CCONJ
fuelectenerg-1260	624	30	experimental	experimental	ADJ
fuelectenerg-1260	624	31	methods	method	NOUN
fuelectenerg-1260	624	32	in	in	ADP
fuelectenerg-1260	624	33	structures	structure	NOUN
fuelectenerg-1260	624	34	,	,	PUNCT
fuelectenerg-1260	624	35	vol	vol	NOUN
fuelectenerg-1260	624	36	.	.	PROPN
fuelectenerg-1260	624	37	2	2	NUM
fuelectenerg-1260	624	38	,	,	PUNCT
fuelectenerg-1260	624	39	2008	2008	NUM
fuelectenerg-1260	624	40	,	,	PUNCT
fuelectenerg-1260	624	41	imperial	imperial	ADJ
fuelectenerg-1260	624	42	college	college	NOUN
fuelectenerg-1260	624	43	press	press	NOUN
fuelectenerg-1260	624	44	.	.	PUNCT
fuelectenerg-1260	625	1	[	[	X
fuelectenerg-1260	625	2	34	34	NUM
fuelectenerg-1260	625	3	]	]	PUNCT
fuelectenerg-1260	625	4	t.bechtold	t.bechtold	ADJ
fuelectenerg-1260	625	5	,	,	PUNCT
fuelectenerg-1260	625	6	,	,	PUNCT
fuelectenerg-1260	625	7	e.b	e.b	PROPN
fuelectenerg-1260	625	8	.	.	PROPN
fuelectenerg-1260	625	9	rudnyi	rudnyi	PROPN
fuelectenerg-1260	625	10	,	,	PUNCT
fuelectenerg-1260	625	11	,	,	PUNCT
fuelectenerg-1260	625	12	j.g.korvink	j.g.korvink	X
fuelectenerg-1260	625	13	,	,	PUNCT
fuelectenerg-1260	625	14	“	"	PUNCT
fuelectenerg-1260	625	15	automatic	automatic	ADJ
fuelectenerg-1260	625	16	order	order	NOUN
fuelectenerg-1260	625	17	reduction	reduction	NOUN
fuelectenerg-1260	625	18	of	of	ADP
fuelectenerg-1260	625	19	thermo	thermo	NOUN
fuelectenerg-1260	625	20	-	-	PUNCT
fuelectenerg-1260	625	21	electric	electric	ADJ
fuelectenerg-1260	625	22	model	model	NOUN
fuelectenerg-1260	625	23	for	for	ADP
fuelectenerg-1260	625	24	micro	micro	ADJ
fuelectenerg-1260	625	25	-	-	ADJ
fuelectenerg-1260	625	26	ignition	ignition	ADJ
fuelectenerg-1260	625	27	unit	unit	NOUN
fuelectenerg-1260	625	28	”	"	PUNCT
fuelectenerg-1260	625	29	,	,	PUNCT
fuelectenerg-1260	625	30	international	international	ADJ
fuelectenerg-1260	625	31	conference	conference	NOUN
fuelectenerg-1260	625	32	on	on	ADP
fuelectenerg-1260	625	33	simulation	simulation	NOUN
fuelectenerg-1260	625	34	of	of	ADP
fuelectenerg-1260	625	35	semiconductor	semiconductor	NOUN
fuelectenerg-1260	625	36	processes	process	NOUN
fuelectenerg-1260	625	37	and	and	CCONJ
fuelectenerg-1260	625	38	devices	device	NOUN
fuelectenerg-1260	625	39	.	.	PUNCT
fuelectenerg-1260	626	1	sispad	sispad	ADV
fuelectenerg-1260	626	2	(	(	PUNCT
fuelectenerg-1260	626	3	ieee	ieee	NOUN
fuelectenerg-1260	626	4	cat	cat	NOUN
fuelectenerg-1260	626	5	.	.	PUNCT
fuelectenerg-1260	627	1	no	no	INTJ
fuelectenerg-1260	627	2	.	.	NOUN
fuelectenerg-1260	628	1	02th8621	02th8621	NUM
fuelectenerg-1260	628	2	)	)	PUNCT
fuelectenerg-1260	628	3	2002	2002	NUM
fuelectenerg-1260	628	4	,	,	PUNCT
fuelectenerg-1260	628	5	pp	pp	ADV
fuelectenerg-1260	628	6	.	.	PUNCT
fuelectenerg-1260	629	1	131	131	NUM
fuelectenerg-1260	629	2	–	–	SYM
fuelectenerg-1260	629	3	134	134	NUM
fuelectenerg-1260	629	4	.	.	PUNCT
fuelectenerg-1260	630	1	[	[	X
fuelectenerg-1260	630	2	35	35	NUM
fuelectenerg-1260	630	3	]	]	SYM
fuelectenerg-1260	630	4	n.t	n.t	PROPN
fuelectenerg-1260	630	5	.	.	PROPN
fuelectenerg-1260	630	6	nguyen	nguyen	PROPN
fuelectenerg-1260	630	7	and	and	CCONJ
fuelectenerg-1260	630	8	s.t	s.t	PROPN
fuelectenerg-1260	630	9	.	.	PROPN
fuelectenerg-1260	630	10	wereley	wereley	PROPN
fuelectenerg-1260	630	11	,	,	PUNCT
fuelectenerg-1260	630	12	integrated	integrated	ADJ
fuelectenerg-1260	630	13	microsystems	microsystem	NOUN
fuelectenerg-1260	630	14	:	:	PUNCT
fuelectenerg-1260	630	15	fundamentals	fundamental	NOUN
fuelectenerg-1260	630	16	and	and	CCONJ
fuelectenerg-1260	630	17	applications	application	NOUN
fuelectenerg-1260	630	18	of	of	ADP
fuelectenerg-1260	630	19	microfluidics	microfluidic	NOUN
fuelectenerg-1260	630	20	(	(	PUNCT
fuelectenerg-1260	630	21	2nd	2nd	PROPN
fuelectenerg-1260	630	22	edition	edition	PROPN
fuelectenerg-1260	630	23	)	)	PUNCT
fuelectenerg-1260	630	24	,	,	PUNCT
fuelectenerg-1260	630	25	2006	2006	NUM
fuelectenerg-1260	630	26	,	,	PUNCT
fuelectenerg-1260	630	27	artech	artech	NOUN
fuelectenerg-1260	630	28	house	house	NOUN
fuelectenerg-1260	630	29	.	.	PUNCT
fuelectenerg-1260	631	1	[	[	X
fuelectenerg-1260	631	2	36	36	NUM
fuelectenerg-1260	631	3	]	]	X
fuelectenerg-1260	631	4	r.	r.	PROPN
fuelectenerg-1260	631	5	sitte	sitte	PROPN
fuelectenerg-1260	631	6	,	,	PUNCT
fuelectenerg-1260	631	7	“	"	PUNCT
fuelectenerg-1260	631	8	visualizing	visualize	VERB
fuelectenerg-1260	631	9	reliability	reliability	NOUN
fuelectenerg-1260	631	10	in	in	ADP
fuelectenerg-1260	631	11	mems	mems	PROPN
fuelectenerg-1260	631	12	vr	vr	PROPN
fuelectenerg-1260	631	13	-	-	PUNCT
fuelectenerg-1260	631	14	cad	cad	PROPN
fuelectenerg-1260	631	15	tool	tool	NOUN
fuelectenerg-1260	631	16	”	"	PUNCT
fuelectenerg-1260	631	17	,	,	PUNCT
fuelectenerg-1260	631	18	journal	journal	NOUN
fuelectenerg-1260	631	19	of	of	ADP
fuelectenerg-1260	631	20	wscg	wscg	NOUN
fuelectenerg-1260	631	21	,	,	PUNCT
fuelectenerg-1260	631	22	vol	vol	NOUN
fuelectenerg-1260	631	23	.	.	PROPN
fuelectenerg-1260	631	24	11	11	NUM
fuelectenerg-1260	631	25	,	,	PUNCT
fuelectenerg-1260	631	26	no	no	INTJ
fuelectenerg-1260	631	27	.	.	NOUN
fuelectenerg-1260	631	28	3	3	NUM
fuelectenerg-1260	631	29	,	,	PUNCT
fuelectenerg-1260	631	30	2003	2003	NUM
fuelectenerg-1260	631	31	,	,	PUNCT
fuelectenerg-1260	631	32	pp	pp	ADP
fuelectenerg-1260	631	33	.	.	PUNCT
fuelectenerg-1260	631	34	433	433	NUM
fuelectenerg-1260	631	35	-	-	SYM
fuelectenerg-1260	631	36	439	439	NUM
fuelectenerg-1260	631	37	.	.	PUNCT
fuelectenerg-1260	632	1	[	[	X
fuelectenerg-1260	632	2	37	37	NUM
fuelectenerg-1260	632	3	]	]	PUNCT
fuelectenerg-1260	632	4	s.	s.	PROPN
fuelectenerg-1260	632	5	muratet	muratet	PROPN
fuelectenerg-1260	632	6	,	,	PUNCT
fuelectenerg-1260	632	7	jy	jy	PROPN
fuelectenerg-1260	632	8	.	.	PROPN
fuelectenerg-1260	632	9	fourniols	fourniols	PROPN
fuelectenerg-1260	632	10	,	,	PUNCT
fuelectenerg-1260	632	11	g.	g.	PROPN
fuelectenerg-1260	632	12	soto	soto	PROPN
fuelectenerg-1260	632	13	-	-	PUNCT
fuelectenerg-1260	632	14	romero	romero	PROPN
fuelectenerg-1260	632	15	,	,	PUNCT
fuelectenerg-1260	632	16	a.	a.	NOUN
fuelectenerg-1260	632	17	endemaño	endemaño	PROPN
fuelectenerg-1260	632	18	,	,	PUNCT
fuelectenerg-1260	632	19	a.	a.	PROPN
fuelectenerg-1260	632	20	marty	marty	PROPN
fuelectenerg-1260	632	21	,	,	PUNCT
fuelectenerg-1260	632	22	m.	m.	NOUN
fuelectenerg-1260	632	23	desmulliez	desmulliez	NOUN
fuelectenerg-1260	632	24	“	"	PUNCT
fuelectenerg-1260	632	25	mems	mems	ADJ
fuelectenerg-1260	632	26	reliability	reliability	NOUN
fuelectenerg-1260	632	27	modelling	modelling	NOUN
fuelectenerg-1260	632	28	methodolog	methodolog	NOUN
fuelectenerg-1260	632	29	:	:	PUNCT
fuelectenerg-1260	632	30	application	application	NOUN
fuelectenerg-1260	632	31	to	to	PART
fuelectenerg-1260	632	32	wobble	wobble	VERB
fuelectenerg-1260	632	33	micromotor	micromotor	NOUN
fuelectenerg-1260	632	34	failure	failure	NOUN
fuelectenerg-1260	632	35	analysis	analysis	NOUN
fuelectenerg-1260	632	36	”	"	PUNCT
fuelectenerg-1260	632	37	,	,	PUNCT
fuelectenerg-1260	632	38	microelectronics	microelectronic	NOUN
fuelectenerg-1260	632	39	reliability	reliability	NOUN
fuelectenerg-1260	632	40	,	,	PUNCT
fuelectenerg-1260	632	41	vol	vol	NOUN
fuelectenerg-1260	632	42	.	.	PROPN
fuelectenerg-1260	632	43	43	43	NUM
fuelectenerg-1260	632	44	,	,	PUNCT
fuelectenerg-1260	632	45	pp	pp	ADJ
fuelectenerg-1260	632	46	.	.	PUNCT
fuelectenerg-1260	633	1	1945	1945	NUM
fuelectenerg-1260	633	2	-	-	SYM
fuelectenerg-1260	633	3	1949	1949	NUM
fuelectenerg-1260	633	4	,	,	PUNCT
fuelectenerg-1260	633	5	2003	2003	NUM
fuelectenerg-1260	633	6	.	.	PUNCT
fuelectenerg-1260	634	1	[	[	X
fuelectenerg-1260	634	2	38	38	NUM
fuelectenerg-1260	634	3	]	]	PUNCT
fuelectenerg-1260	634	4	a.	a.	NOUN
fuelectenerg-1260	634	5	dewey	dewey	PROPN
fuelectenerg-1260	634	6	,	,	PUNCT
fuelectenerg-1260	634	7	v.	v.	ADP
fuelectenerg-1260	634	8	srinivasan	srinivasan	PROPN
fuelectenerg-1260	634	9	,	,	PUNCT
fuelectenerg-1260	634	10	e.	e.	PROPN
fuelectenerg-1260	634	11	icoz	icoz	PROPN
fuelectenerg-1260	634	12	,	,	PUNCT
fuelectenerg-1260	634	13	“	"	PUNCT
fuelectenerg-1260	634	14	visual	visual	ADJ
fuelectenerg-1260	634	15	modeling	modeling	NOUN
fuelectenerg-1260	634	16	and	and	CCONJ
fuelectenerg-1260	634	17	design	design	NOUN
fuelectenerg-1260	634	18	of	of	ADP
fuelectenerg-1260	634	19	microelectromechanical	microelectromechanical	ADJ
fuelectenerg-1260	634	20	system	system	NOUN
fuelectenerg-1260	634	21	transducers	transducer	NOUN
fuelectenerg-1260	634	22	”	"	PUNCT
fuelectenerg-1260	634	23	,	,	PUNCT
fuelectenerg-1260	634	24	microelectronics	microelectronic	NOUN
fuelectenerg-1260	634	25	journal	journal	NOUN
fuelectenerg-1260	634	26	,	,	PUNCT
fuelectenerg-1260	634	27	vol	vol	NOUN
fuelectenerg-1260	634	28	.	.	PROPN
fuelectenerg-1260	634	29	32	32	NUM
fuelectenerg-1260	634	30	,	,	PUNCT
fuelectenerg-1260	634	31	issue	issue	NOUN
fuelectenerg-1260	634	32	4	4	NUM
fuelectenerg-1260	634	33	,	,	PUNCT
fuelectenerg-1260	634	34	pp	pp	ADJ
fuelectenerg-1260	634	35	.	.	PUNCT
fuelectenerg-1260	635	1	373	373	NUM
fuelectenerg-1260	635	2	-	-	SYM
fuelectenerg-1260	635	3	381	381	NUM
fuelectenerg-1260	635	4	,	,	PUNCT
fuelectenerg-1260	635	5	april	april	PROPN
fuelectenerg-1260	635	6	2001	2001	NUM
fuelectenerg-1260	635	7	.	.	PUNCT
fuelectenerg-1260	636	1	[	[	X
fuelectenerg-1260	636	2	39	39	NUM
fuelectenerg-1260	636	3	]	]	PUNCT
fuelectenerg-1260	636	4	s.	s.	PROPN
fuelectenerg-1260	636	5	p.	p.	PROPN
fuelectenerg-1260	636	6	levitan	levitan	PROPN
fuelectenerg-1260	636	7	,	,	PUNCT
fuelectenerg-1260	636	8	t.	t.	PROPN
fuelectenerg-1260	636	9	p.	p.	PROPN
fuelectenerg-1260	636	10	kurzweg	kurzweg	PROPN
fuelectenerg-1260	636	11	,	,	PUNCT
fuelectenerg-1260	636	12	p.	p.	PROPN
fuelectenerg-1260	636	13	j.	j.	PROPN
fuelectenerg-1260	636	14	marchand	marchand	PROPN
fuelectenerg-1260	636	15	,	,	PUNCT
fuelectenerg-1260	636	16	m.	m.	NOUN
fuelectenerg-1260	636	17	a.	a.	NOUN
fuelectenerg-1260	636	18	rempel	rempel	PROPN
fuelectenerg-1260	636	19	,	,	PUNCT
fuelectenerg-1260	636	20	d.	d.	PROPN
fuelectenerg-1260	636	21	m.	m.	PROPN
fuelectenerg-1260	636	22	chiarulli	chiarulli	PROPN
fuelectenerg-1260	636	23	,	,	PUNCT
fuelectenerg-1260	636	24	j.	j.	PROPN
fuelectenerg-1260	636	25	a.	a.	PROPN
fuelectenerg-1260	636	26	martinez	martinez	PROPN
fuelectenerg-1260	636	27	,	,	PUNCT
fuelectenerg-1260	636	28	j.	j.	PROPN
fuelectenerg-1260	636	29	m.	m.	PROPN
fuelectenerg-1260	636	30	bridgen	bridgen	PROPN
fuelectenerg-1260	636	31	,	,	PUNCT
fuelectenerg-1260	636	32	c.	c.	PROPN
fuelectenerg-1260	636	33	fan	fan	PROPN
fuelectenerg-1260	636	34	,	,	PUNCT
fuelectenerg-1260	636	35	f.	f.	PROPN
fuelectenerg-1260	636	36	b.	b.	PROPN
fuelectenerg-1260	636	37	mccormick	mccormick	PROPN
fuelectenerg-1260	636	38	,	,	PUNCT
fuelectenerg-1260	636	39	“	"	PUNCT
fuelectenerg-1260	636	40	chatoyant	chatoyant	ADJ
fuelectenerg-1260	636	41	,	,	PUNCT
fuelectenerg-1260	636	42	a	a	DET
fuelectenerg-1260	636	43	computer	computer	NOUN
fuelectenerg-1260	636	44	-	-	PUNCT
fuelectenerg-1260	636	45	aided	aid	VERB
fuelectenerg-1260	636	46	design	design	NOUN
fuelectenerg-1260	636	47	tool	tool	NOUN
fuelectenerg-1260	636	48	for	for	ADP
fuelectenerg-1260	636	49	free	free	ADJ
fuelectenerg-1260	636	50	-	-	PUNCT
fuelectenerg-1260	636	51	space	space	NOUN
fuelectenerg-1260	636	52	optoelectronic	optoelectronic	ADJ
fuelectenerg-1260	636	53	systems	system	NOUN
fuelectenerg-1260	636	54	”	"	PUNCT
fuelectenerg-1260	636	55	,	,	PUNCT
fuelectenerg-1260	636	56	applied	apply	VERB
fuelectenerg-1260	636	57	optics	optic	NOUN
fuelectenerg-1260	636	58	,	,	PUNCT
fuelectenerg-1260	636	59	vol	vol	NOUN
fuelectenerg-1260	636	60	.	.	PROPN
fuelectenerg-1260	637	1	37	37	NUM
fuelectenerg-1260	637	2	,	,	PUNCT
fuelectenerg-1260	637	3	no	no	INTJ
fuelectenerg-1260	637	4	.	.	NOUN
fuelectenerg-1260	637	5	26	26	NUM
fuelectenerg-1260	637	6	,	,	PUNCT
fuelectenerg-1260	637	7	pp	pp	ADJ
fuelectenerg-1260	637	8	.	.	PUNCT
fuelectenerg-1260	638	1	6078	6078	NUM
fuelectenerg-1260	638	2	-	-	SYM
fuelectenerg-1260	638	3	6092	6092	NUM
fuelectenerg-1260	638	4	,	,	PUNCT
fuelectenerg-1260	638	5	september	september	PROPN
fuelectenerg-1260	638	6	1998	1998	NUM
fuelectenerg-1260	639	1	[	[	X
fuelectenerg-1260	639	2	40	40	NUM
fuelectenerg-1260	639	3	]	]	PUNCT
fuelectenerg-1260	639	4	www.coventor.com	www.coventor.com	X
fuelectenerg-1260	639	5	(	(	PUNCT
fuelectenerg-1260	639	6	sept	sept	PROPN
fuelectenerg-1260	639	7	.	.	PROPN
fuelectenerg-1260	639	8	2015	2015	NUM
fuelectenerg-1260	639	9	)	)	PUNCT
fuelectenerg-1260	640	1	[	[	X
fuelectenerg-1260	640	2	41	41	NUM
fuelectenerg-1260	640	3	]	]	PUNCT
fuelectenerg-1260	640	4	www.cfdrc.com	www.cfdrc.com	X
fuelectenerg-1260	640	5	(	(	PUNCT
fuelectenerg-1260	640	6	sept	sept	PROPN
fuelectenerg-1260	640	7	.	.	PROPN
fuelectenerg-1260	640	8	2015	2015	NUM
fuelectenerg-1260	640	9	)	)	PUNCT
fuelectenerg-1260	641	1	[	[	X
fuelectenerg-1260	641	2	42	42	NUM
fuelectenerg-1260	641	3	]	]	SYM
fuelectenerg-1260	641	4	www.ansys.com	www.ansys.com	X
fuelectenerg-1260	641	5	(	(	PUNCT
fuelectenerg-1260	641	6	sept	sept	PROPN
fuelectenerg-1260	641	7	.	.	PROPN
fuelectenerg-1260	641	8	2015	2015	NUM
fuelectenerg-1260	641	9	)	)	PUNCT
fuelectenerg-1260	642	1	[	[	X
fuelectenerg-1260	642	2	43	43	NUM
fuelectenerg-1260	642	3	]	]	X
fuelectenerg-1260	642	4	d.	d.	PROPN
fuelectenerg-1260	642	5	reznik	reznik	PROPN
fuelectenerg-1260	642	6	,	,	PUNCT
fuelectenerg-1260	642	7	s.	s.	PROPN
fuelectenerg-1260	642	8	brown	brown	PROPN
fuelectenerg-1260	642	9	,	,	PUNCT
fuelectenerg-1260	642	10	j.	j.	PROPN
fuelectenerg-1260	642	11	canny	canny	PROPN
fuelectenerg-1260	642	12	,	,	PUNCT
fuelectenerg-1260	642	13	“	"	PUNCT
fuelectenerg-1260	642	14	dynamic	dynamic	ADJ
fuelectenerg-1260	642	15	simulation	simulation	NOUN
fuelectenerg-1260	642	16	as	as	ADP
fuelectenerg-1260	642	17	a	a	DET
fuelectenerg-1260	642	18	design	design	NOUN
fuelectenerg-1260	642	19	tool	tool	NOUN
fuelectenerg-1260	642	20	for	for	ADP
fuelectenerg-1260	642	21	a	a	DET
fuelectenerg-1260	642	22	microactuator	microactuator	NOUN
fuelectenerg-1260	642	23	array	array	NOUN
fuelectenerg-1260	642	24	”	"	PUNCT
fuelectenerg-1260	642	25	,	,	PUNCT
fuelectenerg-1260	642	26	proceedings	proceeding	NOUN
fuelectenerg-1260	642	27	ieee	ieee	PROPN
fuelectenerg-1260	642	28	conference	conference	NOUN
fuelectenerg-1260	642	29	of	of	ADP
fuelectenerg-1260	642	30	robotics	robotic	NOUN
fuelectenerg-1260	642	31	and	and	CCONJ
fuelectenerg-1260	642	32	automation	automation	NOUN
fuelectenerg-1260	642	33	(	(	PUNCT
fuelectenerg-1260	642	34	icra	icra	PROPN
fuelectenerg-1260	642	35	)	)	PUNCT
fuelectenerg-1260	642	36	,	,	PUNCT
fuelectenerg-1260	642	37	albuquerque	albuquerque	PROPN
fuelectenerg-1260	642	38	,	,	PUNCT
fuelectenerg-1260	642	39	nm	nm	PROPN
fuelectenerg-1260	642	40	,	,	PUNCT
fuelectenerg-1260	642	41	april	april	PROPN
fuelectenerg-1260	642	42	1997	1997	NUM
fuelectenerg-1260	642	43	,	,	PUNCT
fuelectenerg-1260	642	44	pp	pp	ADP
fuelectenerg-1260	642	45	.	.	PUNCT
fuelectenerg-1260	643	1	1675	1675	NUM
fuelectenerg-1260	643	2	-	-	SYM
fuelectenerg-1260	643	3	1680	1680	NUM
fuelectenerg-1260	643	4	.	.	PUNCT
fuelectenerg-1260	644	1	[	[	X
fuelectenerg-1260	644	2	44	44	NUM
fuelectenerg-1260	644	3	]	]	PUNCT
fuelectenerg-1260	644	4	j.	j.	PROPN
fuelectenerg-1260	644	5	gilbert	gilbert	PROPN
fuelectenerg-1260	644	6	,	,	PUNCT
fuelectenerg-1260	644	7	“	"	PUNCT
fuelectenerg-1260	644	8	integrating	integrate	VERB
fuelectenerg-1260	644	9	cad	cad	NOUN
fuelectenerg-1260	644	10	tools	tool	NOUN
fuelectenerg-1260	644	11	for	for	ADP
fuelectenerg-1260	644	12	mems	mem	NOUN
fuelectenerg-1260	644	13	design	design	NOUN
fuelectenerg-1260	644	14	”	"	PUNCT
fuelectenerg-1260	644	15	,	,	PUNCT
fuelectenerg-1260	644	16	ieee	ieee	NOUN
fuelectenerg-1260	644	17	computer	computer	NOUN
fuelectenerg-1260	644	18	,	,	PUNCT
fuelectenerg-1260	644	19	vol	vol	NOUN
fuelectenerg-1260	644	20	.	.	PROPN
fuelectenerg-1260	644	21	31	31	NUM
fuelectenerg-1260	644	22	,	,	PUNCT
fuelectenerg-1260	644	23	issue	issue	NOUN
fuelectenerg-1260	644	24	4	4	NUM
fuelectenerg-1260	644	25	,	,	PUNCT
fuelectenerg-1260	644	26	pp	pp	ADJ
fuelectenerg-1260	644	27	.	.	PUNCT
fuelectenerg-1260	645	1	98	98	NUM
fuelectenerg-1260	645	2	-	-	SYM
fuelectenerg-1260	645	3	101	101	NUM
fuelectenerg-1260	645	4	,	,	PUNCT
fuelectenerg-1260	645	5	1998	1998	NUM
fuelectenerg-1260	645	6	.	.	PUNCT
fuelectenerg-1260	646	1	[	[	X
fuelectenerg-1260	646	2	45	45	NUM
fuelectenerg-1260	646	3	]	]	SYM
fuelectenerg-1260	646	4	www.memscap.com	www.memscap.com	X
fuelectenerg-1260	646	5	(	(	PUNCT
fuelectenerg-1260	646	6	sept	sept	PROPN
fuelectenerg-1260	646	7	.	.	PROPN
fuelectenerg-1260	646	8	2015	2015	NUM
fuelectenerg-1260	646	9	)	)	PUNCT
fuelectenerg-1260	647	1	[	[	X
fuelectenerg-1260	647	2	46	46	NUM
fuelectenerg-1260	647	3	]	]	X
fuelectenerg-1260	647	4	www.intellisense.com	www.intellisense.com	X
fuelectenerg-1260	647	5	(	(	PUNCT
fuelectenerg-1260	647	6	sept	sept	PROPN
fuelectenerg-1260	647	7	.	.	PROPN
fuelectenerg-1260	647	8	2015	2015	NUM
fuelectenerg-1260	647	9	)	)	PUNCT
fuelectenerg-1260	648	1	[	[	X
fuelectenerg-1260	648	2	47	47	NUM
fuelectenerg-1260	648	3	]	]	X
fuelectenerg-1260	648	4	r.	r.	PROPN
fuelectenerg-1260	648	5	gaddi	gaddi	PROPN
fuelectenerg-1260	648	6	and	and	CCONJ
fuelectenerg-1260	648	7	j.	j.	PROPN
fuelectenerg-1260	648	8	iannacci	iannacci	PROPN
fuelectenerg-1260	648	9	,	,	PUNCT
fuelectenerg-1260	648	10	“	"	PUNCT
fuelectenerg-1260	648	11	hierarchical	hierarchical	ADJ
fuelectenerg-1260	648	12	multi	multi	ADJ
fuelectenerg-1260	648	13	-	-	ADJ
fuelectenerg-1260	648	14	domain	domain	ADJ
fuelectenerg-1260	648	15	mems	mem	NOUN
fuelectenerg-1260	648	16	simulation	simulation	NOUN
fuelectenerg-1260	648	17	within	within	ADP
fuelectenerg-1260	648	18	an	an	DET
fuelectenerg-1260	648	19	ic	ic	ADJ
fuelectenerg-1260	648	20	-	-	PUNCT
fuelectenerg-1260	648	21	design	design	NOUN
fuelectenerg-1260	648	22	framework	framework	NOUN
fuelectenerg-1260	648	23	”	"	PUNCT
fuelectenerg-1260	648	24	,	,	PUNCT
fuelectenerg-1260	648	25	sensors	sensor	NOUN
fuelectenerg-1260	648	26	and	and	CCONJ
fuelectenerg-1260	648	27	microsystems	microsystem	NOUN
fuelectenerg-1260	648	28	,	,	PUNCT
fuelectenerg-1260	648	29	pp	pp	ADP
fuelectenerg-1260	648	30	.	.	PUNCT
fuelectenerg-1260	649	1	461	461	NUM
fuelectenerg-1260	649	2	-	-	SYM
fuelectenerg-1260	649	3	466	466	NUM
fuelectenerg-1260	649	4	,	,	PUNCT
fuelectenerg-1260	649	5	2004	2004	NUM
fuelectenerg-1260	649	6	.	.	PUNCT
fuelectenerg-1260	650	1	[	[	X
fuelectenerg-1260	650	2	48	48	NUM
fuelectenerg-1260	650	3	]	]	PUNCT
fuelectenerg-1260	650	4	m.	m.	NOUN
fuelectenerg-1260	650	5	m.	m.	NOUN
fuelectenerg-1260	650	6	dasigenis	dasigenis	PROPN
fuelectenerg-1260	650	7	,	,	PUNCT
fuelectenerg-1260	650	8	d.	d.	PROPN
fuelectenerg-1260	650	9	j.	j.	PROPN
fuelectenerg-1260	650	10	soudris	soudris	PROPN
fuelectenerg-1260	650	11	,	,	PUNCT
fuelectenerg-1260	650	12	s.	s.	PROPN
fuelectenerg-1260	650	13	k.	k.	PROPN
fuelectenerg-1260	650	14	vasilopoulou	vasilopoulou	PROPN
fuelectenerg-1260	650	15	,	,	PUNCT
fuelectenerg-1260	650	16	and	and	CCONJ
fuelectenerg-1260	650	17	a.	a.	NOUN
fuelectenerg-1260	650	18	t.	t.	PROPN
fuelectenerg-1260	650	19	thanailakis	thanailakis	PROPN
fuelectenerg-1260	650	20	,	,	PUNCT
fuelectenerg-1260	650	21	“	"	PUNCT
fuelectenerg-1260	650	22	a	a	DET
fuelectenerg-1260	650	23	cad	cad	NOUN
fuelectenerg-1260	650	24	tool	tool	NOUN
fuelectenerg-1260	650	25	for	for	ADP
fuelectenerg-1260	650	26	automatic	automatic	ADJ
fuelectenerg-1260	650	27	generation	generation	NOUN
fuelectenerg-1260	650	28	of	of	ADP
fuelectenerg-1260	650	29	rns	rn	NOUN
fuelectenerg-1260	650	30	&	&	CCONJ
fuelectenerg-1260	650	31	qrns	qrn	NOUN
fuelectenerg-1260	650	32	converters	converter	NOUN
fuelectenerg-1260	650	33	,	,	PUNCT
fuelectenerg-1260	650	34	microelectronics	microelectronic	NOUN
fuelectenerg-1260	650	35	,	,	PUNCT
fuelectenerg-1260	650	36	microsystems	microsystem	NOUN
fuelectenerg-1260	650	37	and	and	CCONJ
fuelectenerg-1260	650	38	nanotechnology	nanotechnology	NOUN
fuelectenerg-1260	650	39	,	,	PUNCT
fuelectenerg-1260	650	40	pp	pp	ADP
fuelectenerg-1260	650	41	.	.	PUNCT
fuelectenerg-1260	650	42	297300	297300	NUM
fuelectenerg-1260	650	43	,	,	PUNCT
fuelectenerg-1260	650	44	2001	2001	NUM
fuelectenerg-1260	650	45	.	.	PUNCT
fuelectenerg-1260	651	1	[	[	X
fuelectenerg-1260	651	2	49	49	NUM
fuelectenerg-1260	651	3	]	]	X
fuelectenerg-1260	651	4	r.	r.	PROPN
fuelectenerg-1260	651	5	bardohl	bardohl	PROPN
fuelectenerg-1260	651	6	,	,	PUNCT
fuelectenerg-1260	651	7	g.	g.	PROPN
fuelectenerg-1260	651	8	taentzer	taentzer	PROPN
fuelectenerg-1260	651	9	,	,	PUNCT
fuelectenerg-1260	651	10	m.	m.	NOUN
fuelectenerg-1260	651	11	minas	minas	PROPN
fuelectenerg-1260	651	12	,	,	PUNCT
fuelectenerg-1260	651	13	a.	a.	NOUN
fuelectenerg-1260	651	14	schürr	schürr	NOUN
fuelectenerg-1260	651	15	,	,	PUNCT
fuelectenerg-1260	651	16	“	"	PUNCT
fuelectenerg-1260	651	17	application	application	NOUN
fuelectenerg-1260	651	18	of	of	ADP
fuelectenerg-1260	651	19	graph	graph	NOUN
fuelectenerg-1260	651	20	transformation	transformation	NOUN
fuelectenerg-1260	651	21	to	to	ADP
fuelectenerg-1260	651	22	visual	visual	ADJ
fuelectenerg-1260	651	23	languages	language	NOUN
fuelectenerg-1260	651	24	”	"	PUNCT
fuelectenerg-1260	651	25	,	,	PUNCT
fuelectenerg-1260	651	26	handbook	handbook	NOUN
fuelectenerg-1260	651	27	of	of	ADP
fuelectenerg-1260	651	28	graph	graph	NOUN
fuelectenerg-1260	651	29	grammars	grammar	NOUN
fuelectenerg-1260	651	30	and	and	CCONJ
fuelectenerg-1260	651	31	computing	compute	VERB
fuelectenerg-1260	651	32	by	by	ADP
fuelectenerg-1260	651	33	graph	graph	NOUN
fuelectenerg-1260	651	34	transformation	transformation	NOUN
fuelectenerg-1260	651	35	,	,	PUNCT
fuelectenerg-1260	651	36	pp.105	pp.105	PROPN
fuelectenerg-1260	651	37	-	-	PUNCT
fuelectenerg-1260	651	38	180	180	NUM
fuelectenerg-1260	651	39	,	,	PUNCT
fuelectenerg-1260	651	40	1999	1999	NUM
fuelectenerg-1260	651	41	.	.	PUNCT
fuelectenerg-1260	652	1	[	[	X
fuelectenerg-1260	652	2	50	50	NUM
fuelectenerg-1260	652	3	]	]	PUNCT
fuelectenerg-1260	652	4	s.	s.	PROPN
fuelectenerg-1260	652	5	hengsbach	hengsbach	PROPN
fuelectenerg-1260	652	6	,	,	PUNCT
fuelectenerg-1260	652	7	a.	a.	PROPN
fuelectenerg-1260	652	8	díaz	díaz	PROPN
fuelectenerg-1260	652	9	lantada	lantada	PROPN
fuelectenerg-1260	652	10	,	,	PUNCT
fuelectenerg-1260	652	11	“	"	PUNCT
fuelectenerg-1260	652	12	rapid	rapid	ADJ
fuelectenerg-1260	652	13	prototyping	prototyping	NOUN
fuelectenerg-1260	652	14	of	of	ADP
fuelectenerg-1260	652	15	multi	multi	ADJ
fuelectenerg-1260	652	16	-	-	ADJ
fuelectenerg-1260	652	17	scale	scale	ADJ
fuelectenerg-1260	652	18	biomedical	biomedical	ADJ
fuelectenerg-1260	652	19	microdevices	microdevice	NOUN
fuelectenerg-1260	652	20	by	by	ADP
fuelectenerg-1260	652	21	combining	combine	VERB
fuelectenerg-1260	652	22	additive	additive	ADJ
fuelectenerg-1260	652	23	manufacturing	manufacturing	NOUN
fuelectenerg-1260	652	24	technologies	technology	NOUN
fuelectenerg-1260	652	25	”	"	PUNCT
fuelectenerg-1260	652	26	biomed	biome	VERB
fuelectenerg-1260	652	27	microdevices	microdevice	NOUN
fuelectenerg-1260	652	28	16	16	NUM
fuelectenerg-1260	652	29	,	,	PUNCT
fuelectenerg-1260	652	30	pp	pp	ADJ
fuelectenerg-1260	652	31	.	.	PUNCT
fuelectenerg-1260	653	1	617–627	617–627	NUM
fuelectenerg-1260	653	2	,	,	PUNCT
fuelectenerg-1260	653	3	2014	2014	NUM
fuelectenerg-1260	653	4	.	.	PUNCT
fuelectenerg-1260	654	1	[	[	X
fuelectenerg-1260	654	2	51	51	NUM
fuelectenerg-1260	654	3	]	]	X
fuelectenerg-1260	654	4	http://www.coventor.com/mems-solutions/	http://www.coventor.com/mems-solutions/	PROPN
fuelectenerg-1260	654	5	(	(	PUNCT
fuelectenerg-1260	654	6	september	september	PROPN
fuelectenerg-1260	654	7	2015	2015	NUM
fuelectenerg-1260	654	8	)	)	PUNCT
fuelectenerg-1260	655	1	[	[	X
fuelectenerg-1260	655	2	52	52	NUM
fuelectenerg-1260	655	3	]	]	SYM
fuelectenerg-1260	655	4	http://www.softmems.com/mems_pro.html	http://www.softmems.com/mems_pro.html	PROPN
fuelectenerg-1260	655	5	(	(	PUNCT
fuelectenerg-1260	655	6	september	september	PROPN
fuelectenerg-1260	655	7	2015	2015	NUM
fuelectenerg-1260	655	8	)	)	PUNCT
fuelectenerg-1260	656	1	[	[	X
fuelectenerg-1260	656	2	53	53	NUM
fuelectenerg-1260	656	3	]	]	SYM
fuelectenerg-1260	656	4	http://tannereda.com/mems	http://tannereda.com/mems	PROPN
fuelectenerg-1260	656	5	(	(	PUNCT
fuelectenerg-1260	656	6	september	september	PROPN
fuelectenerg-1260	656	7	2015	2015	NUM
fuelectenerg-1260	656	8	)	)	PUNCT
fuelectenerg-1260	657	1	[	[	X
fuelectenerg-1260	657	2	54	54	NUM
fuelectenerg-1260	657	3	]	]	PUNCT
fuelectenerg-1260	657	4	http://www.intellisense.com/	http://www.intellisense.com/	NOUN
fuelectenerg-1260	657	5	(	(	PUNCT
fuelectenerg-1260	657	6	september	september	PROPN
fuelectenerg-1260	657	7	2015	2015	NUM
fuelectenerg-1260	657	8	)	)	PUNCT
fuelectenerg-1260	658	1	[	[	X
fuelectenerg-1260	658	2	55	55	NUM
fuelectenerg-1260	658	3	]	]	PUNCT
fuelectenerg-1260	658	4	a.	a.	NOUN
fuelectenerg-1260	658	5	bertsch	bertsch	PROPN
fuelectenerg-1260	658	6	,	,	PUNCT
fuelectenerg-1260	658	7	p.	p.	NOUN
fuelectenerg-1260	658	8	bernhard	bernhard	PROPN
fuelectenerg-1260	658	9	,	,	PUNCT
fuelectenerg-1260	658	10	c.	c.	PROPN
fuelectenerg-1260	658	11	vogt	vogt	PROPN
fuelectenerg-1260	658	12	,	,	PUNCT
fuelectenerg-1260	658	13	p.	p.	NOUN
fuelectenerg-1260	658	14	renaud	renaud	NOUN
fuelectenerg-1260	658	15	,	,	PUNCT
fuelectenerg-1260	658	16	,	,	PUNCT
fuelectenerg-1260	658	17	"	"	PUNCT
fuelectenerg-1260	658	18	rapid	rapid	ADJ
fuelectenerg-1260	658	19	prototyping	prototyping	NOUN
fuelectenerg-1260	658	20	of	of	ADP
fuelectenerg-1260	658	21	small	small	ADJ
fuelectenerg-1260	658	22	size	size	NOUN
fuelectenerg-1260	658	23	objects	object	NOUN
fuelectenerg-1260	658	24	"	"	PUNCT
fuelectenerg-1260	658	25	,	,	PUNCT
fuelectenerg-1260	658	26	rapid	rapid	ADJ
fuelectenerg-1260	658	27	prototyping	prototyping	NOUN
fuelectenerg-1260	658	28	journal	journal	NOUN
fuelectenerg-1260	658	29	,	,	PUNCT
fuelectenerg-1260	658	30	vol	vol	NOUN
fuelectenerg-1260	658	31	.	.	PROPN
fuelectenerg-1260	658	32	6	6	NUM
fuelectenerg-1260	658	33	,	,	PUNCT
fuelectenerg-1260	658	34	issue	issue	NOUN
fuelectenerg-1260	658	35	4	4	NUM
fuelectenerg-1260	658	36	,	,	PUNCT
fuelectenerg-1260	658	37	pp	pp	ADJ
fuelectenerg-1260	658	38	.	.	PUNCT
fuelectenerg-1260	659	1	259	259	NUM
fuelectenerg-1260	659	2	–	–	PUNCT
fuelectenerg-1260	659	3	266	266	NUM
fuelectenerg-1260	659	4	,	,	PUNCT
fuelectenerg-1260	659	5	2000	2000	NUM
fuelectenerg-1260	659	6	.	.	PUNCT
fuelectenerg-1260	660	1	[	[	X
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fuelectenerg-1260	660	3	]	]	X
fuelectenerg-1260	660	4	c.h	c.h	PROPN
fuelectenerg-1260	660	5	.	.	PROPN
fuelectenerg-1260	660	6	lin	lin	PROPN
fuelectenerg-1260	660	7	,	,	PUNCT
fuelectenerg-1260	660	8	g.b	g.b	PROPN
fuelectenerg-1260	660	9	.	.	PROPN
fuelectenerg-1260	660	10	lee	lee	PROPN
fuelectenerg-1260	660	11	,	,	PUNCT
fuelectenerg-1260	660	12	y.h	y.h	PROPN
fuelectenerg-1260	660	13	.	.	PROPN
fuelectenerg-1260	660	14	lin	lin	PROPN
fuelectenerg-1260	660	15	,	,	PUNCT
fuelectenerg-1260	660	16	g.l	g.l	PROPN
fuelectenerg-1260	660	17	.	.	PROPN
fuelectenerg-1260	660	18	chang	chang	PROPN
fuelectenerg-1260	661	1	“	"	PUNCT
fuelectenerg-1260	661	2	a	a	DET
fuelectenerg-1260	661	3	fast	fast	ADJ
fuelectenerg-1260	661	4	prototyping	prototyping	NOUN
fuelectenerg-1260	661	5	process	process	NOUN
fuelectenerg-1260	661	6	for	for	ADP
fuelectenerg-1260	661	7	fabrication	fabrication	NOUN
fuelectenerg-1260	661	8	of	of	ADP
fuelectenerg-1260	661	9	microfluidic	microfluidic	ADJ
fuelectenerg-1260	661	10	systems	system	NOUN
fuelectenerg-1260	661	11	on	on	ADP
fuelectenerg-1260	661	12	soda	soda	NOUN
fuelectenerg-1260	661	13	-	-	PUNCT
fuelectenerg-1260	661	14	lime	lime	NOUN
fuelectenerg-1260	661	15	glass	glass	NOUN
fuelectenerg-1260	661	16	”	"	PUNCT
fuelectenerg-1260	661	17	j.	j.	PROPN
fuelectenerg-1260	661	18	micromech	micromech	PROPN
fuelectenerg-1260	661	19	.	.	PUNCT
fuelectenerg-1260	662	1	microeng	microeng	PROPN
fuelectenerg-1260	662	2	.	.	PUNCT
fuelectenerg-1260	663	1	11	11	NUM
fuelectenerg-1260	663	2	pp	pp	NOUN
fuelectenerg-1260	663	3	.	.	PUNCT
fuelectenerg-1260	664	1	726–732	726–732	NUM
fuelectenerg-1260	664	2	,	,	PUNCT
fuelectenerg-1260	664	3	2001	2001	NUM
fuelectenerg-1260	664	4	.	.	PUNCT
fuelectenerg-1260	665	1	http://griffith.summon.serialssolutions.com/2.0.0/link/0/elvhcxmwy2awntiz0eure1iskw0sddiskk2szy1nleehoqazpcqzjiuaamfkispibg-ixhmtymbkzrnluhrzdxh20iunzmrdxzbik4b9cgcncexmitgwapvlqrimcsa2qpjrkjcxphiymkqlmyaap5iypxpzpfock7_kvdnjbinc5gaatzcxjg	http://griffith.summon.serialssolutions.com/2.0.0/link/0/elvhcxmwy2awntiz0eure1iskw0sddiskk2szy1nleehoqazpcqzjiuaamfkispibg-ixhmtymbkzrnluhrzdxh20iunzmrdxzbik4b9cgcncexmitgwapvlqrimcsa2qpjrkjcxphiymkqlmyaap5iypxpzpfock7_kvdnjbinc5gaatzcxjg	PROPN
fuelectenerg-1260	666	1	http://www.sciencedirect.com/science/article/pii/s0924424705000749	http://www.sciencedirect.com/science/article/pii/s0924424705000749	PROPN
fuelectenerg-1260	667	1	http://www.sciencedirect.com/science/article/pii/s0924424705000749	http://www.sciencedirect.com/science/article/pii/s0924424705000749	X
fuelectenerg-1260	667	2	http://www.sciencedirect.com/science/article/pii/s0924424705000749	http://www.sciencedirect.com/science/article/pii/s0924424705000749	VERB
fuelectenerg-1260	668	1	http://www.sciencedirect.com/science/journal/09244247/121/1	http://www.sciencedirect.com/science/journal/09244247/121/1	NOUN
fuelectenerg-1260	668	2	http://www.worldscientific.com/series/cems	http://www.worldscientific.com/series/cem	NOUN
fuelectenerg-1260	668	3	http://www.coventor.com/	http://www.coventor.com/	VERB
fuelectenerg-1260	668	4	http://www.cfdrc.com/	http://www.cfdrc.com/	PROPN
fuelectenerg-1260	668	5	http://www.ansys.com/	http://www.ansys.com/	NOUN
fuelectenerg-1260	668	6	http://www.memscap.com/	http://www.memscap.com/	NOUN
fuelectenerg-1260	668	7	http://www.intellisense.com/	http://www.intellisense.com/	NOUN
fuelectenerg-1260	668	8	http://www.coventor.com/mems-solutions/	http://www.coventor.com/mems-solutions/	PROPN
fuelectenerg-1260	668	9	http://www.softmems.com/mems_pro.html	http://www.softmems.com/mems_pro.html	NUM
fuelectenerg-1260	668	10	http://tannereda.com/mems	http://tannereda.com/mem	NOUN
fuelectenerg-1260	668	11	http://www.intellisense.com/	http://www.intellisense.com/	NOUN
fuelectenerg-1260	668	12	mems	mem	NOUN
fuelectenerg-1260	668	13	design	design	NOUN
fuelectenerg-1260	668	14	simplification	simplification	NOUN
fuelectenerg-1260	668	15	with	with	ADP
fuelectenerg-1260	668	16	virtual	virtual	ADJ
fuelectenerg-1260	668	17	prototyping	prototyping	NOUN
fuelectenerg-1260	668	18	33	33	NUM
fuelectenerg-1260	668	19	[	[	SYM
fuelectenerg-1260	668	20	57	57	NUM
fuelectenerg-1260	668	21	]	]	PUNCT
fuelectenerg-1260	668	22	s.	s.	PROPN
fuelectenerg-1260	668	23	k.	k.	PROPN
fuelectenerg-1260	668	24	sampath	sampath	PROPN
fuelectenerg-1260	668	25	,	,	PUNCT
fuelectenerg-1260	668	26	l.	l.	PROPN
fuelectenerg-1260	668	27	st.clair	st.clair	PROPN
fuelectenerg-1260	668	28	,	,	PUNCT
fuelectenerg-1260	668	29	xingtao	xingtao	PROPN
fuelectenerg-1260	668	30	wu	wu	PROPN
fuelectenerg-1260	668	31	,	,	PUNCT
fuelectenerg-1260	668	32	d.	d.	PROPN
fuelectenerg-1260	668	33	v.	v.	PROPN
fuelectenerg-1260	668	34	ivanov	ivanov	PROPN
fuelectenerg-1260	668	35	,	,	PUNCT
fuelectenerg-1260	668	36	q.	q.	PROPN
fuelectenerg-1260	668	37	wang	wang	PROPN
fuelectenerg-1260	668	38	,	,	PUNCT
fuelectenerg-1260	668	39	c.	c.	PROPN
fuelectenerg-1260	668	40	ghosh	ghosh	PROPN
fuelectenerg-1260	668	41	,	,	PUNCT
fuelectenerg-1260	668	42	k.	k.	PROPN
fuelectenerg-1260	668	43	r.	r.	PROPN
fuelectenerg-1260	668	44	farmer	farmer	PROPN
fuelectenerg-1260	668	45	.	.	PUNCT
fuelectenerg-1260	669	1	“	"	PUNCT
fuelectenerg-1260	669	2	rapid	rapid	ADJ
fuelectenerg-1260	669	3	mems	mem	NOUN
fuelectenerg-1260	669	4	prototyping	prototyping	NOUN
fuelectenerg-1260	669	5	using	use	VERB
fuelectenerg-1260	669	6	su-8	su-8	NOUN
fuelectenerg-1260	669	7	,	,	PUNCT
fuelectenerg-1260	669	8	wafer	wafer	NOUN
fuelectenerg-1260	669	9	bonding	bonding	NOUN
fuelectenerg-1260	669	10	and	and	CCONJ
fuelectenerg-1260	669	11	deep	deep	ADJ
fuelectenerg-1260	669	12	reactive	reactive	ADJ
fuelectenerg-1260	669	13	ion	ion	NOUN
fuelectenerg-1260	669	14	etching	etch	VERB
fuelectenerg-1260	669	15	”	"	PUNCT
fuelectenerg-1260	669	16	ieee	ieee	NOUN
fuelectenerg-1260	669	17	proceedings	proceeding	NOUN
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fuelectenerg-1260	669	19	the	the	DET
fuelectenerg-1260	669	20	fourteenth	fourteenth	ADJ
fuelectenerg-1260	669	21	biennial	biennial	ADJ
fuelectenerg-1260	669	22	university	university	NOUN
fuelectenerg-1260	669	23	/	/	SYM
fuelectenerg-1260	669	24	government	government	NOUN
fuelectenerg-1260	669	25	/	/	SYM
fuelectenerg-1260	669	26	industry	industry	NOUN
fuelectenerg-1260	669	27	microelectronics	microelectronic	NOUN
fuelectenerg-1260	669	28	symposium	symposium	NOUN
fuelectenerg-1260	669	29	virginia	virginia	PROPN
fuelectenerg-1260	669	30	commonwealth	commonwealth	PROPN
fuelectenerg-1260	669	31	university	university	PROPN
fuelectenerg-1260	669	32	richmond	richmond	PROPN
fuelectenerg-1260	669	33	virginia	virginia	PROPN
fuelectenerg-1260	669	34	,	,	PUNCT
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fuelectenerg-1260	669	36	(	(	PUNCT
fuelectenerg-1260	669	37	cat	cat	NOUN
fuelectenerg-1260	669	38	.	.	PUNCT
fuelectenerg-1260	670	1	no.01ch37197	no.01ch37197	NOUN
fuelectenerg-1260	670	2	)	)	PUNCT
fuelectenerg-1260	671	1	[	[	X
fuelectenerg-1260	671	2	58	58	NUM
fuelectenerg-1260	671	3	]	]	PUNCT
fuelectenerg-1260	671	4	x.	x.	PROPN
fuelectenerg-1260	671	5	li	li	PROPN
fuelectenerg-1260	671	6	,	,	PUNCT
fuelectenerg-1260	671	7	h.	h.	PROPN
fuelectenerg-1260	671	8	choi	choi	PROPN
fuelectenerg-1260	671	9	,	,	PUNCT
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fuelectenerg-1260	671	11	,	,	PUNCT
fuelectenerg-1260	671	12	“	"	PUNCT
fuelectenerg-1260	671	13	micro	micro	ADJ
fuelectenerg-1260	671	14	rapid	rapid	ADJ
fuelectenerg-1260	671	15	prototyping	prototyping	NOUN
fuelectenerg-1260	671	16	system	system	NOUN
fuelectenerg-1260	671	17	for	for	ADP
fuelectenerg-1260	671	18	micro	micro	ADJ
fuelectenerg-1260	671	19	components	component	NOUN
fuelectenerg-1260	671	20	”	"	PUNCT
fuelectenerg-1260	671	21	,	,	PUNCT
fuelectenerg-1260	671	22	thin	thin	ADJ
fuelectenerg-1260	671	23	solid	solid	ADJ
fuelectenerg-1260	671	24	films	film	NOUN
fuelectenerg-1260	671	25	420	420	NUM
fuelectenerg-1260	671	26	–	–	PUNCT
fuelectenerg-1260	671	27	421	421	NUM
fuelectenerg-1260	671	28	,	,	PUNCT
fuelectenerg-1260	671	29	515–523	515–523	NUM
fuelectenerg-1260	671	30	,	,	PUNCT
fuelectenerg-1260	671	31	2002	2002	NUM
fuelectenerg-1260	671	32	.	.	PUNCT
fuelectenerg-1260	672	1	[	[	X
fuelectenerg-1260	672	2	59	59	NUM
fuelectenerg-1260	672	3	]	]	PUNCT
fuelectenerg-1260	672	4	c.	c.	PROPN
fuelectenerg-1260	672	5	khoury	khoury	PROPN
fuelectenerg-1260	672	6	,	,	PUNCT
fuelectenerg-1260	672	7	g.a	g.a	PROPN
fuelectenerg-1260	672	8	.	.	NOUN
fuelectenerg-1260	672	9	mensing	mensing	NOUN
fuelectenerg-1260	672	10	,	,	PUNCT
fuelectenerg-1260	672	11	d.j	d.j	PROPN
fuelectenerg-1260	672	12	.	.	PROPN
fuelectenerg-1260	672	13	beebe	beebe	PROPN
fuelectenerg-1260	672	14	“	"	PUNCT
fuelectenerg-1260	672	15	ultra	ultra	ADJ
fuelectenerg-1260	672	16	rapid	rapid	ADJ
fuelectenerg-1260	672	17	prototyping	prototyping	NOUN
fuelectenerg-1260	672	18	of	of	ADP
fuelectenerg-1260	672	19	microfluidic	microfluidic	ADJ
fuelectenerg-1260	672	20	systems	system	NOUN
fuelectenerg-1260	672	21	using	use	VERB
fuelectenerg-1260	672	22	liquid	liquid	ADJ
fuelectenerg-1260	672	23	phase	phase	NOUN
fuelectenerg-1260	672	24	photopolymerization	photopolymerization	NOUN
fuelectenerg-1260	672	25	”	"	PUNCT
fuelectenerg-1260	672	26	lab	lab	NOUN
fuelectenerg-1260	672	27	on	on	ADP
fuelectenerg-1260	672	28	a	a	DET
fuelectenerg-1260	672	29	chip	chip	NOUN
fuelectenerg-1260	672	30	,	,	PUNCT
fuelectenerg-1260	672	31	vol	vol	NOUN
fuelectenerg-1260	672	32	.	.	PROPN
fuelectenerg-1260	672	33	2	2	NUM
fuelectenerg-1260	672	34	,	,	PUNCT
fuelectenerg-1260	672	35	issue	issue	NOUN
fuelectenerg-1260	672	36	1	1	NUM
fuelectenerg-1260	672	37	,	,	PUNCT
fuelectenerg-1260	672	38	pp	pp	ADP
fuelectenerg-1260	672	39	50–55	50–55	NUM
fuelectenerg-1260	672	40	,	,	PUNCT
fuelectenerg-1260	672	41	2002	2002	NUM
fuelectenerg-1260	672	42	.	.	PUNCT
fuelectenerg-1260	673	1	[	[	X
fuelectenerg-1260	673	2	60	60	NUM
fuelectenerg-1260	673	3	]	]	PUNCT
fuelectenerg-1260	673	4	e.	e.	PROPN
fuelectenerg-1260	673	5	sarajli´c	sarajli´c	PROPN
fuelectenerg-1260	673	6	,	,	PUNCT
fuelectenerg-1260	673	7	m.j	m.j	PROPN
fuelectenerg-1260	673	8	.	.	PROPN
fuelectenerg-1260	673	9	de	de	PROPN
fuelectenerg-1260	673	10	boer	boer	PROPN
fuelectenerg-1260	673	11	,	,	PUNCT
fuelectenerg-1260	673	12	h.	h.	PROPN
fuelectenerg-1260	673	13	v.	v.	PROPN
fuelectenerg-1260	673	14	jansen	jansen	PROPN
fuelectenerg-1260	673	15	,	,	PUNCT
fuelectenerg-1260	673	16	n.	n.	PROPN
fuelectenerg-1260	673	17	arnal	arnal	ADJ
fuelectenerg-1260	673	18	,	,	PUNCT
fuelectenerg-1260	673	19	m.	m.	NOUN
fuelectenerg-1260	673	20	puech	puech	NOUN
fuelectenerg-1260	673	21	,	,	PUNCT
fuelectenerg-1260	673	22	g.	g.	PROPN
fuelectenerg-1260	673	23	krijnen	krijnen	PROPN
fuelectenerg-1260	673	24	,	,	PUNCT
fuelectenerg-1260	673	25	m.	m.	NOUN
fuelectenerg-1260	673	26	elwenspoek	elwenspoek	NOUN
fuelectenerg-1260	673	27	“	"	PUNCT
fuelectenerg-1260	673	28	advanced	advanced	ADJ
fuelectenerg-1260	673	29	plasma	plasma	NOUN
fuelectenerg-1260	673	30	processing	processing	NOUN
fuelectenerg-1260	673	31	combined	combine	VERB
fuelectenerg-1260	673	32	with	with	ADP
fuelectenerg-1260	673	33	trench	trench	NOUN
fuelectenerg-1260	673	34	isolation	isolation	NOUN
fuelectenerg-1260	673	35	technology	technology	NOUN
fuelectenerg-1260	673	36	for	for	ADP
fuelectenerg-1260	673	37	fabrication	fabrication	NOUN
fuelectenerg-1260	673	38	and	and	CCONJ
fuelectenerg-1260	673	39	fast	fast	ADJ
fuelectenerg-1260	673	40	prototyping	prototyping	NOUN
fuelectenerg-1260	673	41	of	of	ADP
fuelectenerg-1260	673	42	high	high	ADJ
fuelectenerg-1260	673	43	aspect	aspect	NOUN
fuelectenerg-1260	673	44	ratio	ratio	NOUN
fuelectenerg-1260	673	45	mems	mem	NOUN
fuelectenerg-1260	673	46	in	in	ADP
fuelectenerg-1260	673	47	standard	standard	ADJ
fuelectenerg-1260	673	48	silicon	silicon	NOUN
fuelectenerg-1260	673	49	wafers	wafer	NOUN
fuelectenerg-1260	673	50	”	"	PUNCT
fuelectenerg-1260	673	51	,	,	PUNCT
fuelectenerg-1260	673	52	institute	institute	NOUN
fuelectenerg-1260	673	53	of	of	ADP
fuelectenerg-1260	673	54	physics	physics	PROPN
fuelectenerg-1260	673	55	publishing	publishing	PROPN
fuelectenerg-1260	673	56	journal	journal	PROPN
fuelectenerg-1260	673	57	of	of	ADP
fuelectenerg-1260	673	58	micromechanics	micromechanic	NOUN
fuelectenerg-1260	673	59	and	and	CCONJ
fuelectenerg-1260	673	60	microengineering	microengineering	NOUN
fuelectenerg-1260	673	61	,	,	PUNCT
fuelectenerg-1260	673	62	j.	j.	PROPN
fuelectenerg-1260	673	63	micromech	micromech	PROPN
fuelectenerg-1260	673	64	.	.	PUNCT
fuelectenerg-1260	674	1	microeng	microeng	PROPN
fuelectenerg-1260	674	2	.	.	PUNCT
fuelectenerg-1260	675	1	14	14	NUM
fuelectenerg-1260	675	2	pp	pp	NOUN
fuelectenerg-1260	675	3	.	.	PUNCT
fuelectenerg-1260	676	1	570–575	570–575	NUM
fuelectenerg-1260	676	2	,	,	PUNCT
fuelectenerg-1260	676	3	2004	2004	NUM
fuelectenerg-1260	676	4	.	.	PUNCT
fuelectenerg-1260	677	1	[	[	X
fuelectenerg-1260	677	2	61	61	NUM
fuelectenerg-1260	677	3	]	]	X
fuelectenerg-1260	677	4	k.c	k.c	PROPN
fuelectenerg-1260	677	5	.	.	PROPN
fuelectenerg-1260	677	6	yung	yung	PROPN
fuelectenerg-1260	677	7	,	,	PUNCT
fuelectenerg-1260	677	8	s.m	s.m	PROPN
fuelectenerg-1260	677	9	.	.	PROPN
fuelectenerg-1260	677	10	mei	mei	PROPN
fuelectenerg-1260	677	11	and	and	CCONJ
fuelectenerg-1260	677	12	t.m	t.m	PROPN
fuelectenerg-1260	677	13	.	.	PUNCT
fuelectenerg-1260	677	14	“	"	PUNCT
fuelectenerg-1260	677	15	yue	yue	PROPN
fuelectenerg-1260	677	16	rapid	rapid	ADJ
fuelectenerg-1260	677	17	prototyping	prototyping	NOUN
fuelectenerg-1260	677	18	of	of	ADP
fuelectenerg-1260	677	19	polymer	polymer	NOUN
fuelectenerg-1260	677	20	-	-	PUNCT
fuelectenerg-1260	677	21	based	base	VERB
fuelectenerg-1260	677	22	mems	mem	NOUN
fuelectenerg-1260	677	23	devices	device	NOUN
fuelectenerg-1260	677	24	using	use	VERB
fuelectenerg-1260	677	25	uv	uv	PROPN
fuelectenerg-1260	677	26	yag	yag	NOUN
fuelectenerg-1260	677	27	laser	laser	NOUN
fuelectenerg-1260	677	28	”	"	PUNCT
fuelectenerg-1260	677	29	,	,	PUNCT
fuelectenerg-1260	677	30	j.	j.	PROPN
fuelectenerg-1260	677	31	micromech	micromech	PROPN
fuelectenerg-1260	677	32	.	.	PUNCT
fuelectenerg-1260	678	1	microeng	microeng	PROPN
fuelectenerg-1260	678	2	.	.	PUNCT
fuelectenerg-1260	679	1	14	14	NUM
fuelectenerg-1260	679	2	,	,	PUNCT
fuelectenerg-1260	679	3	pp	pp	ADJ
fuelectenerg-1260	679	4	.	.	PUNCT
fuelectenerg-1260	680	1	1682–1686	1682–1686	NUM
fuelectenerg-1260	680	2	,	,	PUNCT
fuelectenerg-1260	680	3	2004	2004	NUM
fuelectenerg-1260	681	1	[	[	X
fuelectenerg-1260	681	2	62	62	NUM
fuelectenerg-1260	681	3	]	]	PUNCT
fuelectenerg-1260	681	4	m.	m.	NOUN
fuelectenerg-1260	681	5	abdelgawad	abdelgawad	NOUN
fuelectenerg-1260	681	6	,	,	PUNCT
fuelectenerg-1260	681	7	a.r.wheeler	a.r.wheeler	NOUN
fuelectenerg-1260	681	8	microfluidics	microfluidic	NOUN
fuelectenerg-1260	681	9	and	and	CCONJ
fuelectenerg-1260	681	10	nanofluidics	nanofluidic	NOUN
fuelectenerg-1260	681	11	,	,	PUNCT
fuelectenerg-1260	681	12	springer	springer	NOUN
fuelectenerg-1260	681	13	verlag	verlag	NOUN
fuelectenerg-1260	681	14	,	,	PUNCT
fuelectenerg-1260	681	15	2007	2007	NUM
fuelectenerg-1260	681	16	,	,	PUNCT
fuelectenerg-1260	681	17	101007	101007	NUM
fuelectenerg-1260	681	18	/	/	SYM
fuelectenerg-1260	681	19	s10404007	s10404007	NOUN
fuelectenerg-1260	681	20	-	-	PUNCT
fuelectenerg-1260	681	21	0190	0190	NUM
fuelectenerg-1260	681	22	-	-	PUNCT
fuelectenerg-1260	681	23	3	3	NUM
fuelectenerg-1260	681	24	,	,	PUNCT
fuelectenerg-1260	681	25	[	[	X
fuelectenerg-1260	681	26	63	63	NUM
fuelectenerg-1260	681	27	]	]	PUNCT
fuelectenerg-1260	681	28	m.	m.	NOUN
fuelectenerg-1260	681	29	villarroya	villarroya	PROPN
fuelectenerg-1260	681	30	,	,	PUNCT
fuelectenerg-1260	681	31	n.	n.	NOUN
fuelectenerg-1260	681	32	barniol	barniol	NOUN
fuelectenerg-1260	681	33	,	,	PUNCT
fuelectenerg-1260	681	34	c.	c.	PROPN
fuelectenerg-1260	681	35	martin	martin	PROPN
fuelectenerg-1260	681	36	,	,	PUNCT
fuelectenerg-1260	681	37	f.	f.	PROPN
fuelectenerg-1260	681	38	perez	perez	PROPN
fuelectenerg-1260	681	39	-	-	PUNCT
fuelectenerg-1260	681	40	murano	murano	PROPN
fuelectenerg-1260	681	41	,	,	PUNCT
fuelectenerg-1260	681	42	j.	j.	PROPN
fuelectenerg-1260	681	43	esteve	esteve	PROPN
fuelectenerg-1260	681	44	,	,	PUNCT
fuelectenerg-1260	681	45	l.	l.	PROPN
fuelectenerg-1260	681	46	bruchhaus	bruchhaus	PROPN
fuelectenerg-1260	681	47	,	,	PUNCT
fuelectenerg-1260	681	48	r.	r.	PROPN
fuelectenerg-1260	681	49	jede	jede	PROPN
fuelectenerg-1260	681	50	,	,	PUNCT
fuelectenerg-1260	681	51	e.	e.	PROPN
fuelectenerg-1260	681	52	bourhis	bourhis	PROPN
fuelectenerg-1260	681	53	,	,	PUNCT
fuelectenerg-1260	681	54	j.	j.	PROPN
fuelectenerg-1260	681	55	gierak	gierak	PROPN
fuelectenerg-1260	681	56	,	,	PUNCT
fuelectenerg-1260	681	57	“	"	PUNCT
fuelectenerg-1260	681	58	fabrication	fabrication	NOUN
fuelectenerg-1260	681	59	of	of	ADP
fuelectenerg-1260	681	60	nanogaps	nanogap	NOUN
fuelectenerg-1260	681	61	for	for	ADP
fuelectenerg-1260	681	62	mems	mem	NOUN
fuelectenerg-1260	681	63	prototyping	prototyping	NOUN
fuelectenerg-1260	681	64	using	use	VERB
fuelectenerg-1260	681	65	focused	focus	VERB
fuelectenerg-1260	681	66	ion	ion	NOUN
fuelectenerg-1260	681	67	beam	beam	NOUN
fuelectenerg-1260	681	68	as	as	ADP
fuelectenerg-1260	681	69	a	a	DET
fuelectenerg-1260	681	70	lithographic	lithographic	ADJ
fuelectenerg-1260	681	71	tool	tool	NOUN
fuelectenerg-1260	681	72	and	and	CCONJ
fuelectenerg-1260	681	73	reactive	reactive	ADJ
fuelectenerg-1260	681	74	ion	ion	NOUN
fuelectenerg-1260	681	75	etching	etch	VERB
fuelectenerg-1260	681	76	pattern	pattern	NOUN
fuelectenerg-1260	681	77	”	"	PUNCT
fuelectenerg-1260	681	78	,	,	PUNCT
fuelectenerg-1260	681	79	microelectronic	microelectronic	ADJ
fuelectenerg-1260	681	80	engineering	engineering	NOUN
fuelectenerg-1260	681	81	84	84	NUM
fuelectenerg-1260	681	82	,	,	PUNCT
fuelectenerg-1260	681	83	pp	pp	ADJ
fuelectenerg-1260	681	84	.	.	PUNCT
fuelectenerg-1260	682	1	1215–1218	1215–1218	NUM
fuelectenerg-1260	682	2	,	,	PUNCT
fuelectenerg-1260	682	3	2007	2007	NUM
fuelectenerg-1260	682	4	.	.	PUNCT
fuelectenerg-1260	683	1	[	[	X
fuelectenerg-1260	683	2	64	64	NUM
fuelectenerg-1260	683	3	]	]	PUNCT
fuelectenerg-1260	683	4	j.	j.	PROPN
fuelectenerg-1260	683	5	do	do	VERB
fuelectenerg-1260	683	6	,	,	PUNCT
fuelectenerg-1260	683	7	j.y	j.y	PROPN
fuelectenerg-1260	683	8	.	.	PROPN
fuelectenerg-1260	683	9	zhang	zhang	PROPN
fuelectenerg-1260	683	10	,	,	PUNCT
fuelectenerg-1260	683	11	c.m	c.m	PROPN
fuelectenerg-1260	683	12	.	.	PROPN
fuelectenerg-1260	683	13	klapperich	klapperich	PROPN
fuelectenerg-1260	683	14	,	,	PUNCT
fuelectenerg-1260	683	15	“	"	PUNCT
fuelectenerg-1260	683	16	maskless	maskless	NOUN
fuelectenerg-1260	683	17	writing	writing	NOUN
fuelectenerg-1260	683	18	of	of	ADP
fuelectenerg-1260	683	19	microfluidics	microfluidic	NOUN
fuelectenerg-1260	683	20	:	:	PUNCT
fuelectenerg-1260	683	21	rapid	rapid	ADJ
fuelectenerg-1260	683	22	prototyping	prototyping	NOUN
fuelectenerg-1260	683	23	of	of	ADP
fuelectenerg-1260	683	24	3d	3d	PROPN
fuelectenerg-1260	683	25	microfluidics	microfluidic	NOUN
fuelectenerg-1260	683	26	using	use	VERB
fuelectenerg-1260	683	27	scratch	scratch	PROPN
fuelectenerg-1260	683	28	ona	ona	PROPN
fuelectenerg-1260	683	29	polymer	polymer	NOUN
fuelectenerg-1260	683	30	substrate	substrate	NOUN
fuelectenerg-1260	683	31	”	"	PUNCT
fuelectenerg-1260	683	32	,	,	PUNCT
fuelectenerg-1260	683	33	robotics	robotic	NOUN
fuelectenerg-1260	683	34	and	and	CCONJ
fuelectenerg-1260	683	35	computer	computer	NOUN
fuelectenerg-1260	683	36	-	-	PUNCT
fuelectenerg-1260	683	37	integrated	integrate	VERB
fuelectenerg-1260	683	38	manufacturing	manufacturing	NOUN
fuelectenerg-1260	683	39	,	,	PUNCT
fuelectenerg-1260	683	40	vol	vol	NOUN
fuelectenerg-1260	683	41	.	.	PROPN
fuelectenerg-1260	683	42	27	27	NUM
fuelectenerg-1260	683	43	,	,	PUNCT
fuelectenerg-1260	683	44	issue	issue	NOUN
fuelectenerg-1260	683	45	2	2	NUM
fuelectenerg-1260	683	46	,	,	PUNCT
fuelectenerg-1260	683	47	pp	pp	ADJ
fuelectenerg-1260	683	48	.	.	PUNCT
fuelectenerg-1260	684	1	245–248	245–248	NUM
fuelectenerg-1260	684	2	,	,	PUNCT
fuelectenerg-1260	684	3	april	april	PROPN
fuelectenerg-1260	684	4	2011	2011	NUM
fuelectenerg-1260	684	5	.	.	PUNCT
fuelectenerg-1260	685	1	[	[	X
fuelectenerg-1260	685	2	65	65	NUM
fuelectenerg-1260	685	3	]	]	X
fuelectenerg-1260	685	4	t.	t.	NOUN
fuelectenerg-1260	685	5	meiss	meiss	NOUN
fuelectenerg-1260	685	6	,	,	PUNCT
fuelectenerg-1260	685	7	r.wertschützky	r.wertschützky	ADJ
fuelectenerg-1260	685	8	and	and	CCONJ
fuelectenerg-1260	685	9	b.stoeber	b.stoeber	NUM
fuelectenerg-1260	685	10	,	,	PUNCT
fuelectenerg-1260	685	11	“	"	PUNCT
fuelectenerg-1260	685	12	rapid	rapid	ADJ
fuelectenerg-1260	685	13	prototyping	prototyping	NOUN
fuelectenerg-1260	685	14	of	of	ADP
fuelectenerg-1260	685	15	resistive	resistive	ADJ
fuelectenerg-1260	685	16	mems	mem	NOUN
fuelectenerg-1260	685	17	sensing	sense	VERB
fuelectenerg-1260	685	18	devices	device	NOUN
fuelectenerg-1260	685	19	on	on	ADP
fuelectenerg-1260	685	20	paper	paper	NOUN
fuelectenerg-1260	685	21	substrates	substrate	NOUN
fuelectenerg-1260	685	22	”	"	PUNCT
fuelectenerg-1260	685	23	,	,	PUNCT
fuelectenerg-1260	685	24	ieee	ieee	NOUN
fuelectenerg-1260	685	25	27th	27th	ADJ
fuelectenerg-1260	685	26	international	international	ADJ
fuelectenerg-1260	685	27	conference	conference	NOUN
fuelectenerg-1260	685	28	on	on	ADP
fuelectenerg-1260	685	29	micro	micro	X
fuelectenerg-1260	685	30	electro	electro	VERB
fuelectenerg-1260	685	31	mechanical	mechanical	ADJ
fuelectenerg-1260	685	32	systems	system	NOUN
fuelectenerg-1260	685	33	(	(	PUNCT
fuelectenerg-1260	685	34	mems	mems	PROPN
fuelectenerg-1260	685	35	)	)	PUNCT
fuelectenerg-1260	685	36	,	,	PUNCT
fuelectenerg-1260	685	37	2014	2014	NUM
fuelectenerg-1260	685	38	,	,	PUNCT
fuelectenerg-1260	685	39	pp	pp	ADV
fuelectenerg-1260	685	40	536	536	NUM
fuelectenerg-1260	685	41	–	–	PUNCT
fuelectenerg-1260	685	42	539	539	NUM
fuelectenerg-1260	685	43	.	.	PUNCT
fuelectenerg-1260	686	1	[	[	X
fuelectenerg-1260	686	2	66	66	NUM
fuelectenerg-1260	686	3	]	]	PUNCT
fuelectenerg-1260	686	4	v.	v.	ADP
fuelectenerg-1260	686	5	a.	a.	PROPN
fuelectenerg-1260	686	6	lifton	lifton	PROPN
fuelectenerg-1260	686	7	,	,	PUNCT
fuelectenerg-1260	686	8	g.	g.	PROPN
fuelectenerg-1260	686	9	lifton	lifton	PROPN
fuelectenerg-1260	686	10	,	,	PUNCT
fuelectenerg-1260	686	11	s.	s.	PROPN
fuelectenerg-1260	686	12	simon	simon	PROPN
fuelectenerg-1260	686	13	,	,	PUNCT
fuelectenerg-1260	686	14	“	"	PUNCT
fuelectenerg-1260	686	15	options	option	NOUN
fuelectenerg-1260	686	16	for	for	ADP
fuelectenerg-1260	686	17	additive	additive	ADJ
fuelectenerg-1260	686	18	rapid	rapid	ADJ
fuelectenerg-1260	686	19	prototyping	prototyping	NOUN
fuelectenerg-1260	686	20	methods	method	NOUN
fuelectenerg-1260	686	21	(	(	PUNCT
fuelectenerg-1260	686	22	3d	3d	NOUN
fuelectenerg-1260	686	23	printing	printing	NOUN
fuelectenerg-1260	686	24	)	)	PUNCT
fuelectenerg-1260	686	25	in	in	ADP
fuelectenerg-1260	686	26	mems	mems	ADJ
fuelectenerg-1260	686	27	technology	technology	NOUN
fuelectenerg-1260	686	28	”	"	PUNCT
fuelectenerg-1260	686	29	,	,	PUNCT
fuelectenerg-1260	686	30	rapid	rapid	ADJ
fuelectenerg-1260	686	31	prototyping	prototyping	NOUN
fuelectenerg-1260	686	32	journal	journal	NOUN
fuelectenerg-1260	686	33	,	,	PUNCT
fuelectenerg-1260	686	34	vol	vol	NOUN
fuelectenerg-1260	686	35	.	.	PROPN
fuelectenerg-1260	686	36	20	20	NUM
fuelectenerg-1260	686	37	,	,	PUNCT
fuelectenerg-1260	686	38	issue	issue	NOUN
fuelectenerg-1260	686	39	5	5	NUM
fuelectenerg-1260	686	40	,	,	PUNCT
fuelectenerg-1260	686	41	pp	pp	ADJ
fuelectenerg-1260	686	42	.	.	PUNCT
fuelectenerg-1260	687	1	403	403	NUM
fuelectenerg-1260	687	2	-	-	SYM
fuelectenerg-1260	687	3	412	412	NUM
fuelectenerg-1260	687	4	,	,	PUNCT
fuelectenerg-1260	687	5	2014	2014	NUM
fuelectenerg-1260	687	6	.	.	PUNCT
fuelectenerg-1260	688	1	[	[	X
fuelectenerg-1260	688	2	67	67	NUM
fuelectenerg-1260	688	3	]	]	PUNCT
fuelectenerg-1260	688	4	j.	j.	PROPN
fuelectenerg-1260	688	5	cecil	cecil	PROPN
fuelectenerg-1260	688	6	,	,	PUNCT
fuelectenerg-1260	688	7	a.	a.	NOUN
fuelectenerg-1260	688	8	kanchanapiboon	kanchanapiboon	PROPN
fuelectenerg-1260	688	9	,	,	PUNCT
fuelectenerg-1260	688	10	“	"	PUNCT
fuelectenerg-1260	688	11	virtual	virtual	ADJ
fuelectenerg-1260	688	12	engineering	engineering	NOUN
fuelectenerg-1260	688	13	approaches	approach	NOUN
fuelectenerg-1260	688	14	in	in	ADP
fuelectenerg-1260	688	15	product	product	NOUN
fuelectenerg-1260	688	16	and	and	CCONJ
fuelectenerg-1260	688	17	process	process	NOUN
fuelectenerg-1260	688	18	design	design	NOUN
fuelectenerg-1260	688	19	”	"	PUNCT
fuelectenerg-1260	688	20	,	,	PUNCT
fuelectenerg-1260	688	21	int	int	PROPN
fuelectenerg-1260	688	22	j	j	PROPN
fuelectenerg-1260	688	23	adv	adv	PROPN
fuelectenerg-1260	688	24	manuf	manuf	PROPN
fuelectenerg-1260	688	25	technol	technol	PROPN
fuelectenerg-1260	688	26	31	31	NUM
fuelectenerg-1260	688	27	,	,	PUNCT
fuelectenerg-1260	688	28	pp	pp	ADP
fuelectenerg-1260	688	29	846–856	846–856	NUM
fuelectenerg-1260	688	30	,	,	PUNCT
fuelectenerg-1260	688	31	2007	2007	NUM
fuelectenerg-1260	688	32	.	.	PUNCT
fuelectenerg-1260	689	1	[	[	X
fuelectenerg-1260	689	2	68	68	NUM
fuelectenerg-1260	689	3	]	]	PUNCT
fuelectenerg-1260	689	4	p.	p.	PROPN
fuelectenerg-1260	689	5	jiang	jiang	PROPN
fuelectenerg-1260	689	6	,	,	PUNCT
fuelectenerg-1260	689	7	x.yan	x.yan	PROPN
fuelectenerg-1260	689	8	,	,	PUNCT
fuelectenerg-1260	689	9	y.	y.	PROPN
fuelectenerg-1260	689	10	liu	liu	PROPN
fuelectenerg-1260	689	11	,	,	PUNCT
fuelectenerg-1260	689	12	,	,	PUNCT
fuelectenerg-1260	689	13	"	"	PUNCT
fuelectenerg-1260	689	14	service	service	NOUN
fuelectenerg-1260	689	15	in	in	ADP
fuelectenerg-1260	689	16	e	e	NOUN
fuelectenerg-1260	689	17	-	-	NOUN
fuelectenerg-1260	689	18	design	design	NOUN
fuelectenerg-1260	689	19	"	"	PUNCT
fuelectenerg-1260	689	20	,	,	PUNCT
fuelectenerg-1260	689	21	journal	journal	NOUN
fuelectenerg-1260	689	22	of	of	ADP
fuelectenerg-1260	689	23	manufacturing	manufacturing	NOUN
fuelectenerg-1260	689	24	technology	technology	NOUN
fuelectenerg-1260	689	25	management	management	NOUN
fuelectenerg-1260	689	26	,	,	PUNCT
fuelectenerg-1260	689	27	vol	vol	NOUN
fuelectenerg-1260	689	28	.	.	PROPN
fuelectenerg-1260	689	29	18	18	NUM
fuelectenerg-1260	689	30	,	,	PUNCT
fuelectenerg-1260	689	31	issue	issue	NOUN
fuelectenerg-1260	689	32	1	1	NUM
fuelectenerg-1260	689	33	,	,	PUNCT
fuelectenerg-1260	689	34	pp	pp	ADJ
fuelectenerg-1260	689	35	.	.	PUNCT
fuelectenerg-1260	690	1	90	90	NUM
fuelectenerg-1260	690	2	–	–	PUNCT
fuelectenerg-1260	690	3	105	105	NUM
fuelectenerg-1260	690	4	,	,	PUNCT
fuelectenerg-1260	690	5	2007	2007	NUM
fuelectenerg-1260	690	6	.	.	PUNCT
fuelectenerg-1260	691	1	[	[	X
fuelectenerg-1260	691	2	69	69	NUM
fuelectenerg-1260	691	3	]	]	X
fuelectenerg-1260	691	4	g.	g.	NOUN
fuelectenerg-1260	691	5	schröpfer	schröpfer	PROPN
fuelectenerg-1260	691	6	,	,	PUNCT
fuelectenerg-1260	691	7	g.	g.	PROPN
fuelectenerg-1260	691	8	lorenz	lorenz	PROPN
fuelectenerg-1260	691	9	,	,	PUNCT
fuelectenerg-1260	691	10	s.	s.	PROPN
fuelectenerg-1260	691	11	rouvillois	rouvillois	PROPN
fuelectenerg-1260	691	12	,	,	PUNCT
fuelectenerg-1260	691	13	s.	s.	PROPN
fuelectenerg-1260	691	14	breit	breit	PROPN
fuelectenerg-1260	691	15	,	,	PUNCT
fuelectenerg-1260	691	16	“	"	PUNCT
fuelectenerg-1260	691	17	novel	novel	ADJ
fuelectenerg-1260	691	18	3d	3d	NUM
fuelectenerg-1260	691	19	modeling	modeling	NOUN
fuelectenerg-1260	691	20	methods	method	NOUN
fuelectenerg-1260	691	21	for	for	ADP
fuelectenerg-1260	691	22	virtual	virtual	ADJ
fuelectenerg-1260	691	23	fabrication	fabrication	NOUN
fuelectenerg-1260	691	24	and	and	CCONJ
fuelectenerg-1260	691	25	eda	eda	PROPN
fuelectenerg-1260	691	26	compatible	compatible	ADJ
fuelectenerg-1260	691	27	design	design	NOUN
fuelectenerg-1260	691	28	of	of	ADP
fuelectenerg-1260	691	29	mems	mem	NOUN
fuelectenerg-1260	691	30	via	via	ADP
fuelectenerg-1260	691	31	parametric	parametric	ADJ
fuelectenerg-1260	691	32	libraries	library	NOUN
fuelectenerg-1260	691	33	,	,	PUNCT
fuelectenerg-1260	691	34	j.	j.	PROPN
fuelectenerg-1260	691	35	micromech	micromech	PROPN
fuelectenerg-1260	691	36	.	.	PUNCT
fuelectenerg-1260	692	1	microeng	microeng	PROPN
fuelectenerg-1260	692	2	.	.	PROPN
fuelectenerg-1260	693	1	20	20	NUM
fuelectenerg-1260	693	2	,	,	PUNCT
fuelectenerg-1260	693	3	064003	064003	NUM
fuelectenerg-1260	694	1	(	(	PUNCT
fuelectenerg-1260	694	2	15pp	15pp	NOUN
fuelectenerg-1260	694	3	)	)	PUNCT
fuelectenerg-1260	694	4	,	,	PUNCT
fuelectenerg-1260	694	5	2010	2010	NUM
fuelectenerg-1260	694	6	.	.	PUNCT
fuelectenerg-1260	695	1	[	[	X
fuelectenerg-1260	695	2	70	70	X
fuelectenerg-1260	695	3	]	]	PUNCT
fuelectenerg-1260	695	4	j.	j.	PROPN
fuelectenerg-1260	695	5	cecil	cecil	PROPN
fuelectenerg-1260	695	6	,	,	PUNCT
fuelectenerg-1260	695	7	j.	j.	PROPN
fuelectenerg-1260	695	8	jones	jones	PROPN
fuelectenerg-1260	695	9	,	,	PUNCT
fuelectenerg-1260	695	10	“	"	PUNCT
fuelectenerg-1260	695	11	vrem	vrem	NOUN
fuelectenerg-1260	695	12	:	:	PUNCT
fuelectenerg-1260	695	13	an	an	DET
fuelectenerg-1260	695	14	advanced	advanced	ADJ
fuelectenerg-1260	695	15	virtual	virtual	ADJ
fuelectenerg-1260	695	16	environment	environment	NOUN
fuelectenerg-1260	695	17	for	for	ADP
fuelectenerg-1260	695	18	micro	micro	PROPN
fuelectenerg-1260	695	19	assembly	assembly	NOUN
fuelectenerg-1260	695	20	”	"	PUNCT
fuelectenerg-1260	695	21	,	,	PUNCT
fuelectenerg-1260	695	22	int	int	PROPN
fuelectenerg-1260	695	23	j	j	PROPN
fuelectenerg-1260	695	24	adv	adv	PROPN
fuelectenerg-1260	695	25	manuf	manuf	PROPN
fuelectenerg-1260	695	26	technol	technol	PROPN
fuelectenerg-1260	695	27	72	72	NUM
fuelectenerg-1260	695	28	,	,	PUNCT
fuelectenerg-1260	695	29	pp	pp	ADJ
fuelectenerg-1260	695	30	.	.	PUNCT
fuelectenerg-1260	696	1	47–56	47–56	NUM
fuelectenerg-1260	696	2	,	,	PUNCT
fuelectenerg-1260	696	3	2014	2014	NUM
fuelectenerg-1260	696	4	.	.	PUNCT
fuelectenerg-1260	697	1	[	[	X
fuelectenerg-1260	697	2	71	71	NUM
fuelectenerg-1260	697	3	]	]	X
fuelectenerg-1260	697	4	r.	r.	PROPN
fuelectenerg-1260	697	5	sitte	sitte	PROPN
fuelectenerg-1260	697	6	,	,	PUNCT
fuelectenerg-1260	697	7	“	"	PUNCT
fuelectenerg-1260	697	8	modeling	model	VERB
fuelectenerg-1260	697	9	mems	mem	NOUN
fuelectenerg-1260	697	10	manufacturability	manufacturability	NOUN
fuelectenerg-1260	697	11	with	with	ADP
fuelectenerg-1260	697	12	virtual	virtual	ADJ
fuelectenerg-1260	697	13	prototyping	prototyping	NOUN
fuelectenerg-1260	697	14	cad	cad	NOUN
fuelectenerg-1260	697	15	tools	tool	NOUN
fuelectenerg-1260	697	16	”	"	PUNCT
fuelectenerg-1260	697	17	,	,	PUNCT
fuelectenerg-1260	697	18	electronics	electronic	NOUN
fuelectenerg-1260	697	19	and	and	CCONJ
fuelectenerg-1260	697	20	structures	structure	NOUN
fuelectenerg-1260	697	21	for	for	ADP
fuelectenerg-1260	697	22	mems	mems	PROPN
fuelectenerg-1260	697	23	ii	ii	PROPN
fuelectenerg-1260	697	24	,	,	PUNCT
fuelectenerg-1260	697	25	neil	neil	PROPN
fuelectenerg-1260	697	26	bergman	bergman	PROPN
fuelectenerg-1260	697	27	,	,	PUNCT
fuelectenerg-1260	697	28	editor	editor	NOUN
fuelectenerg-1260	697	29	,	,	PUNCT
fuelectenerg-1260	697	30	proceedings	proceeding	NOUN
fuelectenerg-1260	697	31	of	of	ADP
fuelectenerg-1260	697	32	spie	spie	ADJ
fuelectenerg-1260	697	33	vol	vol	NOUN
fuelectenerg-1260	697	34	4591	4591	NUM
fuelectenerg-1260	697	35	,	,	PUNCT
fuelectenerg-1260	697	36	pp	pp	ADP
fuelectenerg-1260	697	37	.	.	PUNCT
fuelectenerg-1260	698	1	125	125	NUM
fuelectenerg-1260	698	2	-	-	SYM
fuelectenerg-1260	698	3	133	133	NUM
fuelectenerg-1260	698	4	,	,	PUNCT
fuelectenerg-1260	698	5	2001	2001	NUM
fuelectenerg-1260	698	6	.	.	PUNCT
fuelectenerg-1260	699	1	[	[	X
fuelectenerg-1260	699	2	72	72	NUM
fuelectenerg-1260	699	3	]	]	X
fuelectenerg-1260	699	4	leon.o	leon.o	PROPN
fuelectenerg-1260	699	5	.	.	PUNCT
fuelectenerg-1260	700	1	chua	chua	PROPN
fuelectenerg-1260	700	2	,	,	PUNCT
fuelectenerg-1260	700	3	cnn	cnn	PROPN
fuelectenerg-1260	700	4	:	:	PUNCT
fuelectenerg-1260	700	5	a	a	DET
fuelectenerg-1260	700	6	paradigm	paradigm	NOUN
fuelectenerg-1260	700	7	for	for	ADP
fuelectenerg-1260	700	8	complexity	complexity	NOUN
fuelectenerg-1260	700	9	,	,	PUNCT
fuelectenerg-1260	700	10	ed	ed	NOUN
fuelectenerg-1260	700	11	.	.	PUNCT
fuelectenerg-1260	701	1	leon	leon	PROPN
fuelectenerg-1260	701	2	o.	o.	PROPN
fuelectenerg-1260	701	3	chua	chua	PROPN
fuelectenerg-1260	701	4	,	,	PUNCT
fuelectenerg-1260	701	5	world	world	NOUN
fuelectenerg-1260	701	6	scientific	scientific	ADJ
fuelectenerg-1260	701	7	series	series	NOUN
fuelectenerg-1260	701	8	in	in	ADP
fuelectenerg-1260	701	9	nonlinear	nonlinear	ADJ
fuelectenerg-1260	701	10	science	science	NOUN
fuelectenerg-1260	701	11	,	,	PUNCT
fuelectenerg-1260	701	12	1998	1998	NUM
fuelectenerg-1260	701	13	,	,	PUNCT
fuelectenerg-1260	701	14	series	series	PROPN
fuelectenerg-1260	701	15	a	a	NOUN
fuelectenerg-1260	701	16	,	,	PUNCT
fuelectenerg-1260	701	17	vol	vol	NOUN
fuelectenerg-1260	701	18	.	.	PUNCT
fuelectenerg-1260	701	19	31	31	NUM
fuelectenerg-1260	701	20	.	.	PUNCT
fuelectenerg-1260	702	1	[	[	X
fuelectenerg-1260	702	2	73	73	NUM
fuelectenerg-1260	702	3	]	]	PUNCT
fuelectenerg-1260	702	4	z.	z.	PROPN
fuelectenerg-1260	702	5	li	li	PROPN
fuelectenerg-1260	702	6	,	,	PUNCT
fuelectenerg-1260	702	7	“	"	PUNCT
fuelectenerg-1260	702	8	analysis	analysis	NOUN
fuelectenerg-1260	702	9	and	and	CCONJ
fuelectenerg-1260	702	10	design	design	NOUN
fuelectenerg-1260	702	11	of	of	ADP
fuelectenerg-1260	702	12	virtual	virtual	ADJ
fuelectenerg-1260	702	13	realityvisualization	realityvisualization	NOUN
fuelectenerg-1260	702	14	for	for	ADP
fuelectenerg-1260	702	15	a	a	DET
fuelectenerg-1260	702	16	micro	micro	X
fuelectenerg-1260	702	17	electro	electro	ADJ
fuelectenerg-1260	702	18	mechanical	mechanical	ADJ
fuelectenerg-1260	702	19	systems	system	NOUN
fuelectenerg-1260	702	20	(	(	PUNCT
fuelectenerg-1260	702	21	mems	mems	PROPN
fuelectenerg-1260	702	22	)	)	PUNCT
fuelectenerg-1260	702	23	cad	cad	PROPN
fuelectenerg-1260	702	24	tool	tool	NOUN
fuelectenerg-1260	702	25	”	"	PUNCT
fuelectenerg-1260	702	26	,	,	PUNCT
fuelectenerg-1260	702	27	phd	phd	NOUN
fuelectenerg-1260	702	28	thesis	thesis	NOUN
fuelectenerg-1260	702	29	,	,	PUNCT
fuelectenerg-1260	702	30	2005	2005	NUM
fuelectenerg-1260	702	31	,	,	PUNCT
fuelectenerg-1260	702	32	griffith	griffith	PROPN
fuelectenerg-1260	702	33	university	university	PROPN
fuelectenerg-1260	702	34	,	,	PUNCT
fuelectenerg-1260	702	35	australia	australia	PROPN
fuelectenerg-1260	702	36	.	.	PUNCT
fuelectenerg-1260	703	1	[	[	X
fuelectenerg-1260	703	2	74	74	NUM
fuelectenerg-1260	703	3	]	]	PUNCT
fuelectenerg-1260	703	4	z.	z.	PROPN
fuelectenerg-1260	703	5	li	li	PROPN
fuelectenerg-1260	703	6	,	,	PUNCT
fuelectenerg-1260	703	7	r.	r.	PROPN
fuelectenerg-1260	703	8	sitte	sitte	PROPN
fuelectenerg-1260	703	9	,	,	PUNCT
fuelectenerg-1260	703	10	“	"	PUNCT
fuelectenerg-1260	703	11	scaling	scale	VERB
fuelectenerg-1260	703	12	for	for	ADP
fuelectenerg-1260	703	13	mems	mems	ADJ
fuelectenerg-1260	703	14	virtual	virtual	ADJ
fuelectenerg-1260	703	15	prototyping	prototyping	NOUN
fuelectenerg-1260	703	16	:	:	PUNCT
fuelectenerg-1260	703	17	size	size	NOUN
fuelectenerg-1260	703	18	and	and	CCONJ
fuelectenerg-1260	703	19	motion	motion	NOUN
fuelectenerg-1260	703	20	dynamics	dynamic	NOUN
fuelectenerg-1260	703	21	visualizations	visualization	NOUN
fuelectenerg-1260	703	22	”	"	PUNCT
fuelectenerg-1260	703	23	,	,	PUNCT
fuelectenerg-1260	703	24	proceedings	proceeding	NOUN
fuelectenerg-1260	703	25	of	of	ADP
fuelectenerg-1260	703	26	the	the	DET
fuelectenerg-1260	703	27	13	13	NUM
fuelectenerg-1260	703	28	-	-	PUNCT
fuelectenerg-1260	703	29	th	th	X
fuelectenerg-1260	703	30	international	international	ADJ
fuelectenerg-1260	703	31	conference	conference	NOUN
fuelectenerg-1260	703	32	in	in	ADP
fuelectenerg-1260	703	33	central	central	PROPN
fuelectenerg-1260	703	34	europe	europe	PROPN
fuelectenerg-1260	703	35	on	on	ADP
fuelectenerg-1260	703	36	computer	computer	NOUN
fuelectenerg-1260	703	37	graphics	graphic	NOUN
fuelectenerg-1260	703	38	,	,	PUNCT
fuelectenerg-1260	703	39	visualization	visualization	NOUN
fuelectenerg-1260	703	40	and	and	CCONJ
fuelectenerg-1260	703	41	computer	computer	NOUN
fuelectenerg-1260	703	42	vision	vision	NOUN
fuelectenerg-1260	703	43	,	,	PUNCT
fuelectenerg-1260	703	44	plzen	plzen	PROPN
fuelectenerg-1260	703	45	,	,	PUNCT
fuelectenerg-1260	703	46	czech	czech	PROPN
fuelectenerg-1260	703	47	rep	rep	PROPN
fuelectenerg-1260	703	48	.	.	PROPN
fuelectenerg-1260	703	49	,	,	PUNCT
fuelectenerg-1260	703	50	2005	2005	NUM
fuelectenerg-1260	703	51	,	,	PUNCT
fuelectenerg-1260	703	52	pp	pp	ADJ
fuelectenerg-1260	703	53	.	.	PUNCT
fuelectenerg-1260	704	1	37	37	NUM
fuelectenerg-1260	704	2	-	-	SYM
fuelectenerg-1260	704	3	40	40	NUM
fuelectenerg-1260	704	4	.	.	PUNCT
fuelectenerg-1260	705	1	[	[	X
fuelectenerg-1260	705	2	75	75	NUM
fuelectenerg-1260	705	3	]	]	PUNCT
fuelectenerg-1260	705	4	c.-w	c.-w	PROPN
fuelectenerg-1260	705	5	.	.	PUNCT
fuelectenerg-1260	706	1	choi	choi	PROPN
fuelectenerg-1260	706	2	,	,	PUNCT
fuelectenerg-1260	706	3	k.	k.	PROPN
fuelectenerg-1260	706	4	johan	johan	PROPN
fuelectenerg-1260	706	5	,	,	PUNCT
fuelectenerg-1260	706	6	a.	a.	PROPN
fuelectenerg-1260	706	7	westin	westin	PROPN
fuelectenerg-1260	706	8	,	,	PUNCT
fuelectenerg-1260	706	9	k.s	k.s	PROPN
fuelectenerg-1260	706	10	.	.	PROPN
fuelectenerg-1260	706	11	breuer	breuer	PROPN
fuelectenerg-1260	706	12	:	:	PUNCT
fuelectenerg-1260	706	13	“	"	PUNCT
fuelectenerg-1260	706	14	to	to	PART
fuelectenerg-1260	706	15	slip	slip	VERB
fuelectenerg-1260	706	16	or	or	CCONJ
fuelectenerg-1260	706	17	not	not	PART
fuelectenerg-1260	706	18	to	to	PART
fuelectenerg-1260	706	19	slip	slip	VERB
fuelectenerg-1260	706	20	–	–	PUNCT
fuelectenerg-1260	706	21	water	water	NOUN
fuelectenerg-1260	706	22	flows	flow	NOUN
fuelectenerg-1260	706	23	in	in	ADP
fuelectenerg-1260	706	24	hydrophilic	hydrophilic	ADJ
fuelectenerg-1260	706	25	and	and	CCONJ
fuelectenerg-1260	706	26	hydrophobic	hydrophobic	NOUN
fuelectenerg-1260	706	27	microchannels	microchannel	NOUN
fuelectenerg-1260	706	28	”	"	PUNCT
fuelectenerg-1260	706	29	,	,	PUNCT
fuelectenerg-1260	706	30	in	in	ADP
fuelectenerg-1260	706	31	proceedings	proceeding	NOUN
fuelectenerg-1260	706	32	of	of	ADP
fuelectenerg-1260	706	33	imece	imece	NOUN
fuelectenerg-1260	706	34	2002	2002	NUM
fuelectenerg-1260	706	35	,	,	PUNCT
fuelectenerg-1260	706	36	new	new	PROPN
fuelectenerg-1260	706	37	orleans	orleans	PROPN
fuelectenerg-1260	706	38	,	,	PUNCT
fuelectenerg-1260	706	39	louisiana	louisiana	PROPN
fuelectenerg-1260	706	40	,	,	PUNCT
fuelectenerg-1260	706	41	usa	usa	PROPN
fuelectenerg-1260	706	42	,	,	PUNCT
fuelectenerg-1260	706	43	2002	2002	NUM
fuelectenerg-1260	706	44	,	,	PUNCT
fuelectenerg-1260	706	45	pp	pp	ADJ
fuelectenerg-1260	706	46	.	.	PUNCT
fuelectenerg-1260	707	1	1	1	NUM
fuelectenerg-1260	707	2	-	-	SYM
fuelectenerg-1260	707	3	8	8	NUM
fuelectenerg-1260	707	4	.	.	PUNCT
fuelectenerg-1260	708	1	[	[	X
fuelectenerg-1260	708	2	76	76	NUM
fuelectenerg-1260	708	3	]	]	X
fuelectenerg-1260	708	4	r.	r.	PROPN
fuelectenerg-1260	708	5	sitte	sitte	PROPN
fuelectenerg-1260	708	6	,	,	PUNCT
fuelectenerg-1260	708	7	j.	j.	PROPN
fuelectenerg-1260	708	8	westphal	westphal	PROPN
fuelectenerg-1260	708	9	,	,	PUNCT
fuelectenerg-1260	708	10	“	"	PUNCT
fuelectenerg-1260	708	11	sensitivity	sensitivity	NOUN
fuelectenerg-1260	708	12	to	to	ADP
fuelectenerg-1260	708	13	the	the	DET
fuelectenerg-1260	708	14	onset	onset	NOUN
fuelectenerg-1260	708	15	of	of	ADP
fuelectenerg-1260	708	16	microfluidic	microfluidic	ADJ
fuelectenerg-1260	708	17	slip	slip	NOUN
fuelectenerg-1260	708	18	length	length	NOUN
fuelectenerg-1260	708	19	in	in	ADP
fuelectenerg-1260	708	20	a	a	DET
fuelectenerg-1260	708	21	microchannel	microchannel	NOUN
fuelectenerg-1260	708	22	”	"	PUNCT
fuelectenerg-1260	708	23	,	,	PUNCT
fuelectenerg-1260	708	24	spie	spie	ADJ
fuelectenerg-1260	708	25	volume	volume	NOUN
fuelectenerg-1260	708	26	6035	6035	NUM
fuelectenerg-1260	708	27	:	:	PUNCT
fuelectenerg-1260	708	28	microelectronics	microelectronic	NOUN
fuelectenerg-1260	708	29	:	:	PUNCT
fuelectenerg-1260	708	30	design	design	NOUN
fuelectenerg-1260	708	31	,	,	PUNCT
fuelectenerg-1260	708	32	technology	technology	NOUN
fuelectenerg-1260	708	33	,	,	PUNCT
fuelectenerg-1260	708	34	and	and	CCONJ
fuelectenerg-1260	708	35	packaging	packaging	NOUN
fuelectenerg-1260	708	36	ii	ii	PROPN
fuelectenerg-1260	708	37	,	,	PUNCT
fuelectenerg-1260	708	38	cds197	cds197	PROPN
fuelectenerg-1260	708	39	,	,	PUNCT
fuelectenerg-1260	708	40	pp	pp	ADJ
fuelectenerg-1260	708	41	.	.	PUNCT
fuelectenerg-1260	709	1	6035	6035	NUM
fuelectenerg-1260	709	2	-	-	SYM
fuelectenerg-1260	709	3	60350y-1	60350y-1	NUM
fuelectenerg-1260	709	4	6035	6035	NUM
fuelectenerg-1260	709	5	-	-	SYM
fuelectenerg-1260	709	6	60350y-8	60350y-8	NUM
fuelectenerg-1260	709	7	,	,	PUNCT
fuelectenerg-1260	709	8	2005	2005	NUM
fuelectenerg-1260	709	9	.	.	PUNCT
fuelectenerg-1260	710	1	[	[	X
fuelectenerg-1260	710	2	77	77	NUM
fuelectenerg-1260	710	3	]	]	X
fuelectenerg-1260	710	4	m.	m.	NOUN
fuelectenerg-1260	710	5	aumeerally	aumeerally	ADV
fuelectenerg-1260	710	6	,	,	PUNCT
fuelectenerg-1260	710	7	r.	r.	PROPN
fuelectenerg-1260	710	8	sitte	sitte	PROPN
fuelectenerg-1260	710	9	“	"	PUNCT
fuelectenerg-1260	710	10	layered	layered	ADJ
fuelectenerg-1260	710	11	fluid	fluid	NOUN
fuelectenerg-1260	710	12	model	model	NOUN
fuelectenerg-1260	710	13	and	and	CCONJ
fuelectenerg-1260	710	14	flow	flow	NOUN
fuelectenerg-1260	710	15	simulation	simulation	NOUN
fuelectenerg-1260	710	16	for	for	ADP
fuelectenerg-1260	710	17	microchannels	microchannel	NOUN
fuelectenerg-1260	710	18	using	use	VERB
fuelectenerg-1260	710	19	electrical	electrical	ADJ
fuelectenerg-1260	710	20	networks	network	NOUN
fuelectenerg-1260	710	21	”	"	PUNCT
fuelectenerg-1260	710	22	,	,	PUNCT
fuelectenerg-1260	710	23	journal	journal	NOUN
fuelectenerg-1260	710	24	of	of	ADP
fuelectenerg-1260	710	25	simulation	simulation	NOUN
fuelectenerg-1260	710	26	modelling	model	VERB
fuelectenerg-1260	710	27	practice	practice	NOUN
fuelectenerg-1260	710	28	and	and	CCONJ
fuelectenerg-1260	710	29	theory	theory	NOUN
fuelectenerg-1260	710	30	(	(	PUNCT
fuelectenerg-1260	710	31	elsevier	elsevier	PROPN
fuelectenerg-1260	710	32	)	)	PUNCT
fuelectenerg-1260	710	33	14	14	NUM
fuelectenerg-1260	710	34	,	,	PUNCT
fuelectenerg-1260	710	35	pp	pp	ADJ
fuelectenerg-1260	710	36	.	.	PUNCT
fuelectenerg-1260	711	1	82	82	NUM
fuelectenerg-1260	711	2	-	-	SYM
fuelectenerg-1260	711	3	94	94	NUM
fuelectenerg-1260	711	4	,	,	PUNCT
fuelectenerg-1260	711	5	2006	2006	NUM
fuelectenerg-1260	711	6	.	.	PUNCT
fuelectenerg-1260	712	1	[	[	X
fuelectenerg-1260	712	2	78	78	NUM
fuelectenerg-1260	712	3	]	]	PUNCT
fuelectenerg-1260	712	4	m.	m.	NOUN
fuelectenerg-1260	712	5	aumeerally	aumeerally	ADV
fuelectenerg-1260	712	6	,	,	PUNCT
fuelectenerg-1260	712	7	"	"	PUNCT
fuelectenerg-1260	712	8	simulation	simulation	NOUN
fuelectenerg-1260	712	9	and	and	CCONJ
fuelectenerg-1260	712	10	modelling	modelling	NOUN
fuelectenerg-1260	712	11	of	of	ADP
fuelectenerg-1260	712	12	microfluidic	microfluidic	ADJ
fuelectenerg-1260	712	13	mems	mem	NOUN
fuelectenerg-1260	712	14	devices	device	NOUN
fuelectenerg-1260	712	15	for	for	ADP
fuelectenerg-1260	712	16	vr	vr	PROPN
fuelectenerg-1260	712	17	-	-	PUNCT
fuelectenerg-1260	712	18	cad	cad	NOUN
fuelectenerg-1260	712	19	"	"	PUNCT
fuelectenerg-1260	712	20	phd	phd	NOUN
fuelectenerg-1260	712	21	thesis	thesis	NOUN
fuelectenerg-1260	712	22	,	,	PUNCT
fuelectenerg-1260	712	23	2006	2006	NUM
fuelectenerg-1260	712	24	,	,	PUNCT
fuelectenerg-1260	712	25	griffith	griffith	PROPN
fuelectenerg-1260	712	26	university	university	PROPN
fuelectenerg-1260	712	27	,	,	PUNCT
fuelectenerg-1260	712	28	australia	australia	PROPN
fuelectenerg-1260	712	29	.	.	PUNCT
fuelectenerg-1260	713	1	[	[	X
fuelectenerg-1260	713	2	79	79	NUM
fuelectenerg-1260	713	3	]	]	X
fuelectenerg-1260	713	4	m.	m.	NOUN
fuelectenerg-1260	713	5	lesieur	lesieur	PROPN
fuelectenerg-1260	713	6	,	,	PUNCT
fuelectenerg-1260	713	7	o.	o.	PROPN
fuelectenerg-1260	713	8	métais	métais	PROPN
fuelectenerg-1260	713	9	,	,	PUNCT
fuelectenerg-1260	713	10	p.	p.	PROPN
fuelectenerg-1260	713	11	compte	compte	PROPN
fuelectenerg-1260	713	12	,	,	PUNCT
fuelectenerg-1260	713	13	large	large	ADJ
fuelectenerg-1260	713	14	-	-	PUNCT
fuelectenerg-1260	713	15	eddie	eddie	NOUN
fuelectenerg-1260	713	16	simulations	simulation	NOUN
fuelectenerg-1260	713	17	of	of	ADP
fuelectenerg-1260	713	18	turbulence	turbulence	NOUN
fuelectenerg-1260	713	19	,	,	PUNCT
fuelectenerg-1260	713	20	cambridge	cambridge	PROPN
fuelectenerg-1260	713	21	university	university	PROPN
fuelectenerg-1260	713	22	press	press	NOUN
fuelectenerg-1260	713	23	,	,	PUNCT
fuelectenerg-1260	713	24	2005	2005	NUM
fuelectenerg-1260	713	25	34	34	NUM
fuelectenerg-1260	713	26	r.	r.	PROPN
fuelectenerg-1260	713	27	sitte	sitte	PROPN
fuelectenerg-1260	714	1	[	[	X
fuelectenerg-1260	714	2	80	80	NUM
fuelectenerg-1260	714	3	]	]	PUNCT
fuelectenerg-1260	714	4	r.	r.	PROPN
fuelectenerg-1260	714	5	sitte	sitte	PROPN
fuelectenerg-1260	714	6	,	,	PUNCT
fuelectenerg-1260	714	7	“	"	PUNCT
fuelectenerg-1260	714	8	introductory	introductory	ADJ
fuelectenerg-1260	714	9	physics	physics	NOUN
fuelectenerg-1260	714	10	based	base	VERB
fuelectenerg-1260	714	11	visual	visual	ADJ
fuelectenerg-1260	714	12	simulation	simulation	NOUN
fuelectenerg-1260	714	13	”	"	PUNCT
fuelectenerg-1260	714	14	,	,	PUNCT
fuelectenerg-1260	714	15	proceedings	proceeding	NOUN
fuelectenerg-1260	714	16	of	of	ADP
fuelectenerg-1260	714	17	the	the	DET
fuelectenerg-1260	714	18	c	c	NOUN
fuelectenerg-1260	714	19	#	#	NOUN
fuelectenerg-1260	714	20	and	and	CCONJ
fuelectenerg-1260	714	21	.net	.net	NOUN
fuelectenerg-1260	714	22	technologies	technology	NOUN
fuelectenerg-1260	714	23	,	,	PUNCT
fuelectenerg-1260	714	24	plzen	plzen	PROPN
fuelectenerg-1260	714	25	(	(	PUNCT
fuelectenerg-1260	714	26	czech	czech	PROPN
fuelectenerg-1260	714	27	republic	republic	NOUN
fuelectenerg-1260	714	28	)	)	PUNCT
fuelectenerg-1260	714	29	,	,	PUNCT
fuelectenerg-1260	714	30	2003	2003	NUM
fuelectenerg-1260	714	31	,	,	PUNCT
fuelectenerg-1260	714	32	v.	v.	ADP
fuelectenerg-1260	714	33	skala	skala	PROPN
fuelectenerg-1260	714	34	(	(	PUNCT
fuelectenerg-1260	714	35	ed	ed	NOUN
fuelectenerg-1260	714	36	)	)	PUNCT
fuelectenerg-1260	714	37	,	,	PUNCT
fuelectenerg-1260	714	38	pp	pp	ADJ
fuelectenerg-1260	714	39	.	.	PUNCT
fuelectenerg-1260	715	1	63	63	NUM
fuelectenerg-1260	715	2	-	-	SYM
fuelectenerg-1260	715	3	69	69	NUM
fuelectenerg-1260	715	4	.	.	PUNCT
fuelectenerg-1260	716	1	[	[	X
fuelectenerg-1260	716	2	81	81	NUM
fuelectenerg-1260	716	3	]	]	PUNCT
fuelectenerg-1260	716	4	r.	r.	PROPN
fuelectenerg-1260	716	5	sitte	sitte	PROPN
fuelectenerg-1260	716	6	,	,	PUNCT
fuelectenerg-1260	716	7	r.	r.	PROPN
fuelectenerg-1260	716	8	kovacs	kovacs	PROPN
fuelectenerg-1260	716	9	,	,	PUNCT
fuelectenerg-1260	716	10	“	"	PUNCT
fuelectenerg-1260	716	11	iterative	iterative	ADJ
fuelectenerg-1260	716	12	cluster	cluster	NOUN
fuelectenerg-1260	716	13	splitting	splitting	NOUN
fuelectenerg-1260	716	14	for	for	ADP
fuelectenerg-1260	716	15	fast	fast	ADJ
fuelectenerg-1260	716	16	vr	vr	NOUN
fuelectenerg-1260	716	17	visualization	visualization	NOUN
fuelectenerg-1260	716	18	s	s	NOUN
fuelectenerg-1260	716	19	of	of	ADP
fuelectenerg-1260	716	20	turbulences	turbulence	NOUN
fuelectenerg-1260	716	21	in	in	ADP
fuelectenerg-1260	716	22	microfluids	microfluid	NOUN
fuelectenerg-1260	716	23	”	"	PUNCT
fuelectenerg-1260	716	24	,	,	PUNCT
fuelectenerg-1260	716	25	european	european	ADJ
fuelectenerg-1260	716	26	simulation	simulation	NOUN
fuelectenerg-1260	716	27	and	and	CCONJ
fuelectenerg-1260	716	28	modeling	modeling	NOUN
fuelectenerg-1260	716	29	conference	conference	NOUN
fuelectenerg-1260	716	30	esm'2005	esm'2005	PROPN
fuelectenerg-1260	716	31	,	,	PUNCT
fuelectenerg-1260	716	32	porto	porto	PROPN
fuelectenerg-1260	716	33	,	,	PUNCT
fuelectenerg-1260	716	34	october	october	PROPN
fuelectenerg-1260	716	35	2005	2005	NUM
fuelectenerg-1260	716	36	,	,	PUNCT
fuelectenerg-1260	716	37	pp	pp	ADV
fuelectenerg-1260	716	38	.	.	PUNCT
fuelectenerg-1260	716	39	455	455	NUM
fuelectenerg-1260	716	40	-	-	SYM
fuelectenerg-1260	716	41	462	462	NUM
fuelectenerg-1260	716	42	.	.	PUNCT
fuelectenerg-1260	717	1	[	[	X
fuelectenerg-1260	717	2	82	82	NUM
fuelectenerg-1260	717	3	]	]	X
fuelectenerg-1260	717	4	w.	w.	PROPN
fuelectenerg-1260	717	5	b.j	b.j	PROPN
fuelectenerg-1260	717	6	.	.	PROPN
fuelectenerg-1260	717	7	zimmerman	zimmerman	PROPN
fuelectenerg-1260	717	8	,	,	PUNCT
fuelectenerg-1260	717	9	multiphysics	multiphysics	PROPN
fuelectenerg-1260	717	10	modelling	modelling	NOUN
fuelectenerg-1260	717	11	with	with	ADP
fuelectenerg-1260	717	12	finite	finite	ADJ
fuelectenerg-1260	717	13	element	element	NOUN
fuelectenerg-1260	717	14	analysis	analysis	NOUN
fuelectenerg-1260	717	15	,	,	PUNCT
fuelectenerg-1260	717	16	2006/2007	2006/2007	NUM
fuelectenerg-1260	717	17	world	world	NOUN
fuelectenerg-1260	717	18	scientific	scientific	ADJ
fuelectenerg-1260	717	19	publishing	publishing	NOUN
fuelectenerg-1260	717	20	co.pte.ltd	co.pte.ltd	PROPN
fuelectenerg-1260	717	21	,	,	PUNCT
fuelectenerg-1260	717	22	singapore	singapore	PROPN
fuelectenerg-1260	717	23	.	.	PUNCT
fuelectenerg-1260	718	1	[	[	X
fuelectenerg-1260	718	2	83	83	NUM
fuelectenerg-1260	718	3	]	]	PUNCT
fuelectenerg-1260	718	4	k.	k.	PROPN
fuelectenerg-1260	718	5	tatur	tatur	PROPN
fuelectenerg-1260	718	6	,	,	PUNCT
fuelectenerg-1260	718	7	r.	r.	PROPN
fuelectenerg-1260	718	8	sitte	sitte	PROPN
fuelectenerg-1260	718	9	,	,	PUNCT
fuelectenerg-1260	718	10	“	"	PUNCT
fuelectenerg-1260	718	11	spline	spline	ADJ
fuelectenerg-1260	718	12	approximations	approximation	NOUN
fuelectenerg-1260	718	13	of	of	ADP
fuelectenerg-1260	718	14	flexible	flexible	ADJ
fuelectenerg-1260	718	15	deformations	deformation	NOUN
fuelectenerg-1260	718	16	for	for	ADP
fuelectenerg-1260	718	17	fast	fast	ADJ
fuelectenerg-1260	718	18	dynamic	dynamic	ADJ
fuelectenerg-1260	718	19	vr	vr	NOUN
fuelectenerg-1260	718	20	visualizations	visualization	NOUN
fuelectenerg-1260	718	21	”	"	PUNCT
fuelectenerg-1260	718	22	,	,	PUNCT
fuelectenerg-1260	718	23	proceedings	proceeding	NOUN
fuelectenerg-1260	718	24	of	of	ADP
fuelectenerg-1260	718	25	the	the	DET
fuelectenerg-1260	718	26	european	european	PROPN
fuelectenerg-1260	718	27	simulation	simulation	NOUN
fuelectenerg-1260	718	28	and	and	CCONJ
fuelectenerg-1260	718	29	modeling	model	VERB
fuelectenerg-1260	718	30	conference	conference	NOUN
fuelectenerg-1260	718	31	esmc	esmc	NOUN
fuelectenerg-1260	718	32	2003	2003	NUM
fuelectenerg-1260	718	33	,	,	PUNCT
fuelectenerg-1260	718	34	naples	naples	PROPN
fuelectenerg-1260	718	35	,	,	PUNCT
fuelectenerg-1260	718	36	2003	2003	NUM
fuelectenerg-1260	718	37	,	,	PUNCT
fuelectenerg-1260	718	38	pp	pp	ADP
fuelectenerg-1260	718	39	.	.	PUNCT
fuelectenerg-1260	719	1	309315	309315	NUM
fuelectenerg-1260	719	2	.	.	PUNCT
fuelectenerg-1260	720	1	[	[	X
fuelectenerg-1260	720	2	84	84	NUM
fuelectenerg-1260	720	3	]	]	PUNCT
fuelectenerg-1260	720	4	r.	r.	PROPN
fuelectenerg-1260	720	5	sitte	sitte	PROPN
fuelectenerg-1260	720	6	,	,	PUNCT
fuelectenerg-1260	720	7	j.	j.	PROPN
fuelectenerg-1260	720	8	cai	cai	PROPN
fuelectenerg-1260	720	9	,	,	PUNCT
fuelectenerg-1260	720	10	“	"	PUNCT
fuelectenerg-1260	720	11	visualizing	visualize	VERB
fuelectenerg-1260	720	12	dynamic	dynamic	ADJ
fuelectenerg-1260	720	13	etching	etching	NOUN
fuelectenerg-1260	720	14	in	in	ADP
fuelectenerg-1260	720	15	mems	mems	PROPN
fuelectenerg-1260	720	16	vr	vr	PROPN
fuelectenerg-1260	720	17	-	-	PUNCT
fuelectenerg-1260	720	18	cad	cad	PROPN
fuelectenerg-1260	720	19	tool	tool	NOUN
fuelectenerg-1260	720	20	”	"	PUNCT
fuelectenerg-1260	720	21	proc	proc	NOUN
fuelectenerg-1260	720	22	.	.	PUNCT
fuelectenerg-1260	720	23	of	of	ADP
fuelectenerg-1260	720	24	the	the	DET
fuelectenerg-1260	720	25	14	14	NUM
fuelectenerg-1260	720	26	-	-	PUNCT
fuelectenerg-1260	720	27	th	th	X
fuelectenerg-1260	720	28	international	international	ADJ
fuelectenerg-1260	720	29	conference	conference	NOUN
fuelectenerg-1260	720	30	in	in	ADP
fuelectenerg-1260	720	31	central	central	PROPN
fuelectenerg-1260	720	32	europe	europe	PROPN
fuelectenerg-1260	720	33	on	on	ADP
fuelectenerg-1260	720	34	computer	computer	NOUN
fuelectenerg-1260	720	35	graphics	graphic	NOUN
fuelectenerg-1260	720	36	,	,	PUNCT
fuelectenerg-1260	720	37	visualization	visualization	NOUN
fuelectenerg-1260	720	38	and	and	CCONJ
fuelectenerg-1260	720	39	computer	computer	NOUN
fuelectenerg-1260	720	40	vision	vision	NOUN
fuelectenerg-1260	720	41	,	,	PUNCT
fuelectenerg-1260	720	42	plzen	plzen	PROPN
fuelectenerg-1260	720	43	,	,	PUNCT
fuelectenerg-1260	720	44	czech	czech	PROPN
fuelectenerg-1260	720	45	rep	rep	PROPN
fuelectenerg-1260	720	46	.	.	PROPN
fuelectenerg-1260	720	47	2006	2006	NUM
fuelectenerg-1260	720	48	,	,	PUNCT
fuelectenerg-1260	720	49	pp	pp	ADJ
fuelectenerg-1260	720	50	.	.	PUNCT
fuelectenerg-1260	721	1	343	343	NUM
fuelectenerg-1260	721	2	-	-	SYM
fuelectenerg-1260	721	3	350	350	NUM
fuelectenerg-1260	721	4	.	.	PUNCT
fuelectenerg-1260	722	1	[	[	X
fuelectenerg-1260	722	2	85	85	NUM
fuelectenerg-1260	722	3	]	]	X
fuelectenerg-1260	722	4	d.	d.	PROPN
fuelectenerg-1260	722	5	adalsteinsson	adalsteinsson	PROPN
fuelectenerg-1260	722	6	,	,	PUNCT
fuelectenerg-1260	722	7	j.a	j.a	PROPN
fuelectenerg-1260	722	8	.	.	PROPN
fuelectenerg-1260	722	9	sethian	sethian	PROPN
fuelectenerg-1260	722	10	,	,	PUNCT
fuelectenerg-1260	722	11	“	"	PUNCT
fuelectenerg-1260	722	12	a	a	DET
fuelectenerg-1260	722	13	level	level	NOUN
fuelectenerg-1260	722	14	set	set	VERB
fuelectenerg-1260	722	15	approach	approach	NOUN
fuelectenerg-1260	722	16	to	to	ADP
fuelectenerg-1260	722	17	a	a	DET
fuelectenerg-1260	722	18	unified	unified	ADJ
fuelectenerg-1260	722	19	model	model	NOUN
fuelectenerg-1260	722	20	for	for	ADP
fuelectenerg-1260	722	21	etching	etch	VERB
fuelectenerg-1260	722	22	,	,	PUNCT
fuelectenerg-1260	722	23	deposition	deposition	NOUN
fuelectenerg-1260	722	24	,	,	PUNCT
fuelectenerg-1260	722	25	and	and	CCONJ
fuelectenerg-1260	722	26	lithography	lithography	NOUN
fuelectenerg-1260	722	27	i	i	PRON
fuelectenerg-1260	722	28	:	:	PUNCT
fuelectenerg-1260	722	29	algorithms	algorithm	NOUN
fuelectenerg-1260	722	30	and	and	CCONJ
fuelectenerg-1260	722	31	two	two	NUM
fuelectenerg-1260	722	32	-	-	PUNCT
fuelectenerg-1260	722	33	dimensional	dimensional	ADJ
fuelectenerg-1260	722	34	simulations	simulation	NOUN
fuelectenerg-1260	722	35	”	"	PUNCT
fuelectenerg-1260	722	36	journal	journal	NOUN
fuelectenerg-1260	722	37	of	of	ADP
fuelectenerg-1260	722	38	computational	computational	ADJ
fuelectenerg-1260	722	39	physics	physics	NOUN
fuelectenerg-1260	722	40	,	,	PUNCT
fuelectenerg-1260	722	41	vol	vol	NOUN
fuelectenerg-1260	722	42	.	.	PROPN
fuelectenerg-1260	722	43	120	120	NUM
fuelectenerg-1260	722	44	,	,	PUNCT
fuelectenerg-1260	722	45	pp	pp	ADJ
fuelectenerg-1260	722	46	.	.	PUNCT
fuelectenerg-1260	722	47	128	128	NUM
fuelectenerg-1260	722	48	-	-	SYM
fuelectenerg-1260	722	49	144	144	NUM
fuelectenerg-1260	722	50	,	,	PUNCT
fuelectenerg-1260	722	51	1995	1995	NUM
fuelectenerg-1260	722	52	.	.	PUNCT
fuelectenerg-1260	723	1	[	[	X
fuelectenerg-1260	723	2	86	86	NUM
fuelectenerg-1260	723	3	]	]	PUNCT
fuelectenerg-1260	723	4	a.	a.	NOUN
fuelectenerg-1260	723	5	singh	singh	PROPN
fuelectenerg-1260	723	6	-	-	PUNCT
fuelectenerg-1260	723	7	jhandi	jhandi	PROPN
fuelectenerg-1260	723	8	,	,	PUNCT
fuelectenerg-1260	723	9	r.	r.	PROPN
fuelectenerg-1260	723	10	sitte	sitte	PROPN
fuelectenerg-1260	723	11	,	,	PUNCT
fuelectenerg-1260	723	12	“	"	PUNCT
fuelectenerg-1260	723	13	virtual	virtual	ADJ
fuelectenerg-1260	723	14	etching	etching	NOUN
fuelectenerg-1260	723	15	and	and	CCONJ
fuelectenerg-1260	723	16	transparency	transparency	NOUN
fuelectenerg-1260	723	17	aiding	aiding	NOUN
fuelectenerg-1260	723	18	in	in	ADP
fuelectenerg-1260	723	19	mems	mems	PROPN
fuelectenerg-1260	723	20	design	design	NOUN
fuelectenerg-1260	723	21	”	"	PUNCT
fuelectenerg-1260	723	22	,	,	PUNCT
fuelectenerg-1260	723	23	international	international	ADJ
fuelectenerg-1260	723	24	conference	conference	NOUN
fuelectenerg-1260	723	25	on	on	ADP
fuelectenerg-1260	723	26	information	information	NOUN
fuelectenerg-1260	723	27	technology	technology	NOUN
fuelectenerg-1260	723	28	and	and	CCONJ
fuelectenerg-1260	723	29	applications	application	NOUN
fuelectenerg-1260	723	30	(	(	PUNCT
fuelectenerg-1260	723	31	icita2002	icita2002	NOUN
fuelectenerg-1260	723	32	)	)	PUNCT
fuelectenerg-1260	723	33	,	,	PUNCT
fuelectenerg-1260	723	34	bathurst	bathurst	PROPN
fuelectenerg-1260	723	35	,	,	PUNCT
fuelectenerg-1260	723	36	nsw	nsw	PROPN
fuelectenerg-1260	723	37	australia	australia	PROPN
fuelectenerg-1260	723	38	,	,	PUNCT
fuelectenerg-1260	723	39	november	november	PROPN
fuelectenerg-1260	723	40	2002	2002	NUM
fuelectenerg-1260	723	41	.	.	PUNCT
fuelectenerg-1260	724	1	[	[	X
fuelectenerg-1260	724	2	87	87	NUM
fuelectenerg-1260	724	3	]	]	X
fuelectenerg-1260	724	4	david	david	PROPN
fuelectenerg-1260	724	5	wilson	wilson	PROPN
fuelectenerg-1260	724	6	,	,	PUNCT
fuelectenerg-1260	724	7	fast	fast	ADJ
fuelectenerg-1260	724	8	collision	collision	NOUN
fuelectenerg-1260	724	9	detection	detection	NOUN
fuelectenerg-1260	724	10	and	and	CCONJ
fuelectenerg-1260	724	11	orientation	orientation	NOUN
fuelectenerg-1260	724	12	for	for	ADP
fuelectenerg-1260	724	13	virtual	virtual	ADJ
fuelectenerg-1260	724	14	assembly	assembly	NOUN
fuelectenerg-1260	724	15	of	of	ADP
fuelectenerg-1260	724	16	microsystems	microsystem	NOUN
fuelectenerg-1260	724	17	,	,	PUNCT
fuelectenerg-1260	724	18	b.hon	b.hon	PROPN
fuelectenerg-1260	724	19	.	.	PUNCT
fuelectenerg-1260	725	1	thesis	thesis	PROPN
fuelectenerg-1260	725	2	,	,	PUNCT
fuelectenerg-1260	725	3	nov	nov	PROPN
fuelectenerg-1260	725	4	.	.	PROPN
fuelectenerg-1260	725	5	2006	2006	NUM
fuelectenerg-1260	725	6	,	,	PUNCT
fuelectenerg-1260	725	7	griffith	griffith	PROPN
fuelectenerg-1260	725	8	university	university	PROPN
fuelectenerg-1260	725	9	,	,	PUNCT
fuelectenerg-1260	725	10	australia	australia	PROPN
fuelectenerg-1260	725	11	.	.	PUNCT
fuelectenerg-1260	726	1	[	[	X
fuelectenerg-1260	726	2	88	88	NUM
fuelectenerg-1260	726	3	]	]	PUNCT
fuelectenerg-1260	726	4	a.	a.	NOUN
fuelectenerg-1260	726	5	baer	baer	PROPN
fuelectenerg-1260	726	6	,	,	PUNCT
fuelectenerg-1260	726	7	m.	m.	NOUN
fuelectenerg-1260	726	8	kellermann	kellermann	PROPN
fuelectenerg-1260	726	9	,	,	PUNCT
fuelectenerg-1260	726	10	v.	v.	PROPN
fuelectenerg-1260	726	11	von	von	PROPN
fuelectenerg-1260	726	12	hintzenstern	hintzenstern	PROPN
fuelectenerg-1260	726	13	,	,	PUNCT
fuelectenerg-1260	726	14	w.	w.	PROPN
fuelectenerg-1260	726	15	schoor	schoor	PROPN
fuelectenerg-1260	726	16	(	(	PUNCT
fuelectenerg-1260	726	17	university	university	NOUN
fuelectenerg-1260	726	18	otto	otto	PROPN
fuelectenerg-1260	726	19	v.	v.	PROPN
fuelectenerg-1260	726	20	guericke	guericke	PROPN
fuelectenerg-1260	726	21	,	,	PUNCT
fuelectenerg-1260	726	22	germany	germany	PROPN
fuelectenerg-1260	726	23	)	)	PUNCT
fuelectenerg-1260	726	24	“	"	PUNCT
fuelectenerg-1260	726	25	the	the	DET
fuelectenerg-1260	726	26	magda	magda	PROPN
fuelectenerg-1260	726	27	project	project	NOUN
fuelectenerg-1260	726	28	a	a	DET
fuelectenerg-1260	726	29	computer	computer	NOUN
fuelectenerg-1260	726	30	aided	aid	VERB
fuelectenerg-1260	726	31	mems	mem	NOUN
fuelectenerg-1260	726	32	design	design	NOUN
fuelectenerg-1260	726	33	tool	tool	NOUN
fuelectenerg-1260	726	34	”	"	PUNCT
fuelectenerg-1260	726	35	,	,	PUNCT
fuelectenerg-1260	726	36	research	research	NOUN
fuelectenerg-1260	726	37	report	report	NOUN
fuelectenerg-1260	726	38	,	,	PUNCT
fuelectenerg-1260	726	39	griffitth	griffitth	PROPN
fuelectenerg-1260	726	40	university	university	NOUN
fuelectenerg-1260	726	41	,	,	PUNCT
fuelectenerg-1260	726	42	australia	australia	PROPN
fuelectenerg-1260	726	43	,	,	PUNCT
fuelectenerg-1260	726	44	march	march	PROPN
fuelectenerg-1260	726	45	2003	2003	NUM
fuelectenerg-1260	726	46	.	.	PUNCT