id	sid	tid	token	lemma	pos
fuelectenerg-198	1	1	instruction	instruction	NOUN
fuelectenerg-198	1	2	facta	facta	PROPN
fuelectenerg-198	1	3	universitatis	universitatis	PROPN
fuelectenerg-198	1	4	series	series	NOUN
fuelectenerg-198	1	5	:	:	PUNCT
fuelectenerg-198	1	6	electronics	electronic	NOUN
fuelectenerg-198	1	7	and	and	CCONJ
fuelectenerg-198	1	8	energetics	energetics	NOUN
fuelectenerg-198	1	9	vol	vol	NOUN
fuelectenerg-198	1	10	.	.	PUNCT
fuelectenerg-198	1	11	27	27	NUM
fuelectenerg-198	1	12	,	,	PUNCT
fuelectenerg-198	1	13	no	no	DET
fuelectenerg-198	1	14	2	2	NUM
fuelectenerg-198	1	15	,	,	PUNCT
fuelectenerg-198	1	16	june	june	PROPN
fuelectenerg-198	1	17	2014	2014	NUM
fuelectenerg-198	1	18	,	,	PUNCT
fuelectenerg-198	1	19	pp	pp	ADV
fuelectenerg-198	1	20	.	.	PUNCT
fuelectenerg-198	2	1	259	259	NUM
fuelectenerg-198	2	2	273	273	NUM
fuelectenerg-198	2	3	doi	doi	NOUN
fuelectenerg-198	2	4	:	:	PUNCT
fuelectenerg-198	2	5	10.2298	10.2298	NUM
fuelectenerg-198	2	6	/	/	SYM
fuelectenerg-198	2	7	fuee1402259n	fuee1402259n	VERB
fuelectenerg-198	2	8	physical	physical	ADJ
fuelectenerg-198	2	9	modeling	modeling	NOUN
fuelectenerg-198	2	10	of	of	ADP
fuelectenerg-198	2	11	electrical	electrical	ADJ
fuelectenerg-198	2	12	and	and	CCONJ
fuelectenerg-198	2	13	dielectric	dielectric	ADJ
fuelectenerg-198	2	14	properties	property	NOUN
fuelectenerg-198	2	15	of	of	ADP
fuelectenerg-198	2	16	high	high	ADJ
fuelectenerg-198	2	17	-	-	PUNCT
fuelectenerg-198	2	18	k	k	NOUN
fuelectenerg-198	2	19	ta2o5	ta2o5	PROPN
fuelectenerg-198	2	20	based	base	VERB
fuelectenerg-198	2	21	mos	mos	PROPN
fuelectenerg-198	2	22	capacitors	capacitor	NOUN
fuelectenerg-198	2	23	on	on	ADP
fuelectenerg-198	2	24	silicon	silicon	NOUN
fuelectenerg-198	2	25			PUNCT
fuelectenerg-198	2	26	nenad	nenad	PROPN
fuelectenerg-198	2	27	novkovski	novkovski	PROPN
fuelectenerg-198	2	28	institute	institute	PROPN
fuelectenerg-198	2	29	of	of	ADP
fuelectenerg-198	2	30	physics	physics	PROPN
fuelectenerg-198	2	31	,	,	PUNCT
fuelectenerg-198	2	32	faculty	faculty	NOUN
fuelectenerg-198	2	33	of	of	ADP
fuelectenerg-198	2	34	natural	natural	ADJ
fuelectenerg-198	2	35	sciences	science	NOUN
fuelectenerg-198	2	36	and	and	CCONJ
fuelectenerg-198	2	37	mathematics	mathematic	NOUN
fuelectenerg-198	2	38	,	,	PUNCT
fuelectenerg-198	2	39	university	university	NOUN
fuelectenerg-198	2	40	“	"	PUNCT
fuelectenerg-198	2	41	ss	ss	PROPN
fuelectenerg-198	2	42	.	.	PROPN
fuelectenerg-198	2	43	cyril	cyril	PROPN
fuelectenerg-198	2	44	and	and	CCONJ
fuelectenerg-198	2	45	methodius	methodius	PROPN
fuelectenerg-198	2	46	”	"	PUNCT
fuelectenerg-198	2	47	,	,	PUNCT
fuelectenerg-198	2	48	arhimedova	arhimedova	PROPN
fuelectenerg-198	2	49	3	3	NUM
fuelectenerg-198	2	50	,	,	PUNCT
fuelectenerg-198	2	51	1000	1000	NUM
fuelectenerg-198	2	52	skopje	skopje	NOUN
fuelectenerg-198	2	53	,	,	PUNCT
fuelectenerg-198	2	54	macedonia	macedonia	PROPN
fuelectenerg-198	2	55	abstract	abstract	NOUN
fuelectenerg-198	2	56	.	.	PUNCT
fuelectenerg-198	3	1	in	in	ADP
fuelectenerg-198	3	2	this	this	DET
fuelectenerg-198	3	3	paper	paper	NOUN
fuelectenerg-198	3	4	we	we	PRON
fuelectenerg-198	3	5	present	present	VERB
fuelectenerg-198	3	6	an	an	DET
fuelectenerg-198	3	7	integral	integral	ADJ
fuelectenerg-198	3	8	physical	physical	ADJ
fuelectenerg-198	3	9	model	model	NOUN
fuelectenerg-198	3	10	for	for	ADP
fuelectenerg-198	3	11	describing	describe	VERB
fuelectenerg-198	3	12	electrical	electrical	ADJ
fuelectenerg-198	3	13	and	and	CCONJ
fuelectenerg-198	3	14	dielectric	dielectric	ADJ
fuelectenerg-198	3	15	properties	property	NOUN
fuelectenerg-198	3	16	of	of	ADP
fuelectenerg-198	3	17	mos	mos	NOUN
fuelectenerg-198	3	18	structures	structure	NOUN
fuelectenerg-198	3	19	containing	contain	VERB
fuelectenerg-198	3	20	dielectric	dielectric	ADJ
fuelectenerg-198	3	21	stack	stack	NOUN
fuelectenerg-198	3	22	composed	compose	VERB
fuelectenerg-198	3	23	of	of	ADP
fuelectenerg-198	3	24	a	a	DET
fuelectenerg-198	3	25	high	high	ADJ
fuelectenerg-198	3	26	-	-	PUNCT
fuelectenerg-198	3	27	k	k	NOUN
fuelectenerg-198	3	28	dielectric	dielectric	NOUN
fuelectenerg-198	3	29	(	(	PUNCT
fuelectenerg-198	3	30	with	with	ADP
fuelectenerg-198	3	31	emphasize	emphasize	VERB
fuelectenerg-198	3	32	on	on	ADP
fuelectenerg-198	3	33	pure	pure	ADJ
fuelectenerg-198	3	34	and	and	CCONJ
fuelectenerg-198	3	35	doped	dope	VERB
fuelectenerg-198	3	36	ta2o5	ta2o5	PROPN
fuelectenerg-198	3	37	)	)	PUNCT
fuelectenerg-198	3	38	and	and	CCONJ
fuelectenerg-198	3	39	an	an	DET
fuelectenerg-198	3	40	interfacial	interfacial	ADJ
fuelectenerg-198	3	41	silicon	silicon	NOUN
fuelectenerg-198	3	42	dioxide	dioxide	NOUN
fuelectenerg-198	3	43	or	or	CCONJ
fuelectenerg-198	3	44	silicon	silicon	NOUN
fuelectenerg-198	3	45	oxynitride	oxynitride	ADJ
fuelectenerg-198	3	46	layer	layer	NOUN
fuelectenerg-198	3	47	.	.	PUNCT
fuelectenerg-198	4	1	based	base	VERB
fuelectenerg-198	4	2	on	on	ADP
fuelectenerg-198	4	3	the	the	DET
fuelectenerg-198	4	4	model	model	NOUN
fuelectenerg-198	4	5	,	,	PUNCT
fuelectenerg-198	4	6	an	an	DET
fuelectenerg-198	4	7	equivalent	equivalent	ADJ
fuelectenerg-198	4	8	circuit	circuit	NOUN
fuelectenerg-198	4	9	of	of	ADP
fuelectenerg-198	4	10	the	the	DET
fuelectenerg-198	4	11	structure	structure	NOUN
fuelectenerg-198	4	12	is	be	AUX
fuelectenerg-198	4	13	proposed	propose	VERB
fuelectenerg-198	4	14	.	.	PUNCT
fuelectenerg-198	5	1	validity	validity	NOUN
fuelectenerg-198	5	2	of	of	ADP
fuelectenerg-198	5	3	the	the	DET
fuelectenerg-198	5	4	model	model	NOUN
fuelectenerg-198	5	5	was	be	AUX
fuelectenerg-198	5	6	demonstrated	demonstrate	VERB
fuelectenerg-198	5	7	for	for	ADP
fuelectenerg-198	5	8	structures	structure	NOUN
fuelectenerg-198	5	9	containing	contain	VERB
fuelectenerg-198	5	10	different	different	ADJ
fuelectenerg-198	5	11	metal	metal	NOUN
fuelectenerg-198	5	12	gates	gate	NOUN
fuelectenerg-198	5	13	(	(	PUNCT
fuelectenerg-198	5	14	al	al	PROPN
fuelectenerg-198	5	15	,	,	PUNCT
fuelectenerg-198	5	16	au	au	PROPN
fuelectenerg-198	5	17	,	,	PUNCT
fuelectenerg-198	5	18	pt	pt	PROPN
fuelectenerg-198	5	19	,	,	PUNCT
fuelectenerg-198	5	20	w	w	PROPN
fuelectenerg-198	5	21	,	,	PUNCT
fuelectenerg-198	5	22	tin	tin	NOUN
fuelectenerg-198	5	23	,	,	PUNCT
fuelectenerg-198	5	24	mo	mo	NOUN
fuelectenerg-198	5	25	)	)	PUNCT
fuelectenerg-198	5	26	and	and	CCONJ
fuelectenerg-198	5	27	different	different	ADJ
fuelectenerg-198	5	28	ta2o5	ta2o5	PROPN
fuelectenerg-198	5	29	based	base	VERB
fuelectenerg-198	5	30	high	high	ADJ
fuelectenerg-198	5	31	-	-	PUNCT
fuelectenerg-198	5	32	k	k	NOUN
fuelectenerg-198	5	33	dielectrics	dielectric	NOUN
fuelectenerg-198	5	34	,	,	PUNCT
fuelectenerg-198	5	35	grown	grow	VERB
fuelectenerg-198	5	36	of	of	ADP
fuelectenerg-198	5	37	bare	bare	ADJ
fuelectenerg-198	5	38	or	or	CCONJ
fuelectenerg-198	5	39	nitrided	nitride	VERB
fuelectenerg-198	5	40	silicon	silicon	NOUN
fuelectenerg-198	5	41	substrates	substrate	NOUN
fuelectenerg-198	5	42	.	.	PUNCT
fuelectenerg-198	6	1	the	the	DET
fuelectenerg-198	6	2	model	model	NOUN
fuelectenerg-198	6	3	describes	describe	VERB
fuelectenerg-198	6	4	very	very	ADV
fuelectenerg-198	6	5	well	well	ADV
fuelectenerg-198	6	6	the	the	DET
fuelectenerg-198	6	7	i	i	PROPN
fuelectenerg-198	6	8	-	-	PUNCT
fuelectenerg-198	6	9	v	v	PROPN
fuelectenerg-198	6	10	characteristics	characteristic	NOUN
fuelectenerg-198	6	11	of	of	ADP
fuelectenerg-198	6	12	the	the	DET
fuelectenerg-198	6	13	considered	consider	VERB
fuelectenerg-198	6	14	structures	structure	NOUN
fuelectenerg-198	6	15	,	,	PUNCT
fuelectenerg-198	6	16	as	as	ADV
fuelectenerg-198	6	17	well	well	ADV
fuelectenerg-198	6	18	as	as	ADP
fuelectenerg-198	6	19	frequency	frequency	ADJ
fuelectenerg-198	6	20	dependence	dependence	NOUN
fuelectenerg-198	6	21	of	of	ADP
fuelectenerg-198	6	22	the	the	DET
fuelectenerg-198	6	23	capacitance	capacitance	NOUN
fuelectenerg-198	6	24	in	in	ADP
fuelectenerg-198	6	25	accumulation	accumulation	NOUN
fuelectenerg-198	6	26	.	.	PUNCT
fuelectenerg-198	7	1	stress	stress	NOUN
fuelectenerg-198	7	2	-	-	PUNCT
fuelectenerg-198	7	3	induced	induce	VERB
fuelectenerg-198	7	4	leakage	leakage	NOUN
fuelectenerg-198	7	5	currents	current	NOUN
fuelectenerg-198	7	6	are	be	AUX
fuelectenerg-198	7	7	also	also	ADV
fuelectenerg-198	7	8	effectively	effectively	ADV
fuelectenerg-198	7	9	analyzed	analyze	VERB
fuelectenerg-198	7	10	by	by	ADP
fuelectenerg-198	7	11	the	the	DET
fuelectenerg-198	7	12	use	use	NOUN
fuelectenerg-198	7	13	of	of	ADP
fuelectenerg-198	7	14	the	the	DET
fuelectenerg-198	7	15	model	model	NOUN
fuelectenerg-198	7	16	.	.	PUNCT
fuelectenerg-198	8	1	key	key	ADJ
fuelectenerg-198	8	2	words	word	NOUN
fuelectenerg-198	8	3	:	:	PUNCT
fuelectenerg-198	8	4	high	high	ADJ
fuelectenerg-198	8	5	-	-	PUNCT
fuelectenerg-198	8	6	k	k	NOUN
fuelectenerg-198	8	7	dielectrics	dielectric	NOUN
fuelectenerg-198	8	8	,	,	PUNCT
fuelectenerg-198	8	9	metal	metal	NOUN
fuelectenerg-198	8	10	-	-	PUNCT
fuelectenerg-198	8	11	insulator	insulator	NOUN
fuelectenerg-198	8	12	-	-	PUNCT
fuelectenerg-198	8	13	silicon	silicon	NOUN
fuelectenerg-198	8	14	structures	structure	NOUN
fuelectenerg-198	8	15	,	,	PUNCT
fuelectenerg-198	8	16	conduction	conduction	NOUN
fuelectenerg-198	8	17	mechanisms	mechanism	NOUN
fuelectenerg-198	8	18	in	in	ADP
fuelectenerg-198	8	19	dielectrics	dielectric	NOUN
fuelectenerg-198	8	20	,	,	PUNCT
fuelectenerg-198	8	21	leakage	leakage	NOUN
fuelectenerg-198	8	22	currents	current	NOUN
fuelectenerg-198	8	23	1	1	NUM
fuelectenerg-198	8	24	.	.	PUNCT
fuelectenerg-198	8	25	introduction	introduction	NOUN
fuelectenerg-198	8	26	further	further	ADJ
fuelectenerg-198	8	27	scaling	scaling	NOUN
fuelectenerg-198	8	28	of	of	ADP
fuelectenerg-198	8	29	microelectronic	microelectronic	ADJ
fuelectenerg-198	8	30	devices	device	NOUN
fuelectenerg-198	8	31	required	require	VERB
fuelectenerg-198	8	32	for	for	ADP
fuelectenerg-198	8	33	new	new	ADJ
fuelectenerg-198	8	34	generations	generation	NOUN
fuelectenerg-198	8	35	of	of	ADP
fuelectenerg-198	8	36	integrated	integrated	ADJ
fuelectenerg-198	8	37	circuits	circuit	NOUN
fuelectenerg-198	8	38	is	be	AUX
fuelectenerg-198	8	39	confronting	confront	VERB
fuelectenerg-198	8	40	multiple	multiple	ADJ
fuelectenerg-198	8	41	challenges	challenge	NOUN
fuelectenerg-198	8	42	,	,	PUNCT
fuelectenerg-198	8	43	rather	rather	ADV
fuelectenerg-198	8	44	important	important	ADJ
fuelectenerg-198	8	45	one	one	NUM
fuelectenerg-198	8	46	of	of	ADP
fuelectenerg-198	8	47	them	they	PRON
fuelectenerg-198	8	48	being	be	AUX
fuelectenerg-198	8	49	the	the	DET
fuelectenerg-198	8	50	fabrication	fabrication	NOUN
fuelectenerg-198	8	51	of	of	ADP
fuelectenerg-198	8	52	ultrathin	ultrathin	NOUN
fuelectenerg-198	8	53	dielectric	dielectric	ADJ
fuelectenerg-198	8	54	layers	layer	NOUN
fuelectenerg-198	8	55	used	use	VERB
fuelectenerg-198	8	56	particularly	particularly	ADV
fuelectenerg-198	8	57	in	in	ADP
fuelectenerg-198	8	58	mosfets	mosfet	NOUN
fuelectenerg-198	8	59	and	and	CCONJ
fuelectenerg-198	8	60	drams	dram	NOUN
fuelectenerg-198	8	61	.	.	PUNCT
fuelectenerg-198	9	1	while	while	SCONJ
fuelectenerg-198	9	2	decreasing	decrease	VERB
fuelectenerg-198	9	3	the	the	DET
fuelectenerg-198	9	4	lateral	lateral	ADJ
fuelectenerg-198	9	5	size	size	NOUN
fuelectenerg-198	9	6	of	of	ADP
fuelectenerg-198	9	7	devices	device	NOUN
fuelectenerg-198	9	8	,	,	PUNCT
fuelectenerg-198	9	9	in	in	ADP
fuelectenerg-198	9	10	order	order	NOUN
fuelectenerg-198	9	11	to	to	PART
fuelectenerg-198	9	12	obtain	obtain	VERB
fuelectenerg-198	9	13	the	the	DET
fuelectenerg-198	9	14	required	require	VERB
fuelectenerg-198	9	15	capacitance	capacitance	NOUN
fuelectenerg-198	9	16	,	,	PUNCT
fuelectenerg-198	9	17	a	a	DET
fuelectenerg-198	9	18	decrease	decrease	NOUN
fuelectenerg-198	9	19	of	of	ADP
fuelectenerg-198	9	20	the	the	DET
fuelectenerg-198	9	21	equivalent	equivalent	ADJ
fuelectenerg-198	9	22	oxide	oxide	NOUN
fuelectenerg-198	9	23	thickness	thickness	NOUN
fuelectenerg-198	9	24	is	be	AUX
fuelectenerg-198	9	25	required	require	VERB
fuelectenerg-198	9	26	.	.	PUNCT
fuelectenerg-198	10	1	the	the	DET
fuelectenerg-198	10	2	above	above	ADJ
fuelectenerg-198	10	3	requirement	requirement	NOUN
fuelectenerg-198	10	4	can	can	AUX
fuelectenerg-198	10	5	be	be	AUX
fuelectenerg-198	10	6	met	meet	VERB
fuelectenerg-198	10	7	either	either	CCONJ
fuelectenerg-198	10	8	by	by	ADP
fuelectenerg-198	10	9	decreasing	decrease	VERB
fuelectenerg-198	10	10	the	the	DET
fuelectenerg-198	10	11	physical	physical	ADJ
fuelectenerg-198	10	12	thickness	thickness	NOUN
fuelectenerg-198	10	13	or	or	CCONJ
fuelectenerg-198	10	14	by	by	ADP
fuelectenerg-198	10	15	increasing	increase	VERB
fuelectenerg-198	10	16	the	the	DET
fuelectenerg-198	10	17	permittivity	permittivity	NOUN
fuelectenerg-198	10	18	of	of	ADP
fuelectenerg-198	10	19	the	the	DET
fuelectenerg-198	10	20	dielectric	dielectric	NOUN
fuelectenerg-198	10	21	(	(	PUNCT
fuelectenerg-198	10	22	gate	gate	NOUN
fuelectenerg-198	10	23	oxide	oxide	NOUN
fuelectenerg-198	10	24	for	for	ADP
fuelectenerg-198	10	25	mosfets	mosfet	NOUN
fuelectenerg-198	10	26	,	,	PUNCT
fuelectenerg-198	10	27	dielectric	dielectric	NOUN
fuelectenerg-198	10	28	in	in	ADP
fuelectenerg-198	10	29	mos	mos	PROPN
fuelectenerg-198	10	30	capacitors	capacitor	NOUN
fuelectenerg-198	10	31	of	of	ADP
fuelectenerg-198	10	32	drams	dram	NOUN
fuelectenerg-198	10	33	)	)	PUNCT
fuelectenerg-198	10	34	.	.	PUNCT
fuelectenerg-198	11	1	doped	dope	VERB
fuelectenerg-198	11	2	,	,	PUNCT
fuelectenerg-198	11	3	mixed	mixed	ADJ
fuelectenerg-198	11	4	and	and	CCONJ
fuelectenerg-198	11	5	laminate	laminate	VERB
fuelectenerg-198	11	6	high	high	ADJ
fuelectenerg-198	11	7	-	-	PUNCT
fuelectenerg-198	11	8	permittivity	permittivity	NOUN
fuelectenerg-198	11	9	(	(	PUNCT
fuelectenerg-198	11	10	high	high	ADJ
fuelectenerg-198	11	11	-	-	PUNCT
fuelectenerg-198	11	12	k	k	NOUN
fuelectenerg-198	11	13	)	)	PUNCT
fuelectenerg-198	11	14	dielectric	dielectric	ADJ
fuelectenerg-198	11	15	stacks	stack	NOUN
fuelectenerg-198	11	16	attract	attract	VERB
fuelectenerg-198	11	17	progressively	progressively	ADV
fuelectenerg-198	11	18	higher	high	ADJ
fuelectenerg-198	11	19	attention	attention	NOUN
fuelectenerg-198	11	20	as	as	ADP
fuelectenerg-198	11	21	a	a	DET
fuelectenerg-198	11	22	solution	solution	NOUN
fuelectenerg-198	11	23	for	for	ADP
fuelectenerg-198	11	24	further	further	ADJ
fuelectenerg-198	11	25	improvement	improvement	NOUN
fuelectenerg-198	11	26	of	of	ADP
fuelectenerg-198	11	27	their	their	PRON
fuelectenerg-198	11	28	electrical	electrical	ADJ
fuelectenerg-198	11	29	and	and	CCONJ
fuelectenerg-198	11	30	dielectric	dielectric	ADJ
fuelectenerg-198	11	31	properties	property	NOUN
fuelectenerg-198	11	32	[	[	X
fuelectenerg-198	11	33	1]-[13	1]-[13	NUM
fuelectenerg-198	11	34	]	]	PUNCT
fuelectenerg-198	11	35	.	.	PUNCT
fuelectenerg-198	12	1	it	it	PRON
fuelectenerg-198	12	2	has	have	AUX
fuelectenerg-198	12	3	been	be	AUX
fuelectenerg-198	12	4	shown	show	VERB
fuelectenerg-198	12	5	that	that	SCONJ
fuelectenerg-198	12	6	ta2o5	ta2o5	PROPN
fuelectenerg-198	12	7	,	,	PUNCT
fuelectenerg-198	12	8	known	know	VERB
fuelectenerg-198	12	9	as	as	ADP
fuelectenerg-198	12	10	one	one	NUM
fuelectenerg-198	12	11	of	of	ADP
fuelectenerg-198	12	12	the	the	DET
fuelectenerg-198	12	13	most	most	ADV
fuelectenerg-198	12	14	attractive	attractive	ADJ
fuelectenerg-198	12	15	dielectrics	dielectric	NOUN
fuelectenerg-198	12	16	for	for	ADP
fuelectenerg-198	12	17	the	the	DET
fuelectenerg-198	12	18	nanoscale	nanoscale	ADJ
fuelectenerg-198	12	19	dynamic	dynamic	ADJ
fuelectenerg-198	12	20	random	random	ADJ
fuelectenerg-198	12	21	-	-	PUNCT
fuelectenerg-198	12	22	access	access	NOUN
fuelectenerg-198	12	23	memories	memory	NOUN
fuelectenerg-198	12	24	,	,	PUNCT
fuelectenerg-198	12	25	can	can	AUX
fuelectenerg-198	12	26	improve	improve	VERB
fuelectenerg-198	12	27			PROPN
fuelectenerg-198	12	28	received	receive	VERB
fuelectenerg-198	12	29	february	february	PROPN
fuelectenerg-198	12	30	5	5	NUM
fuelectenerg-198	12	31	,	,	PUNCT
fuelectenerg-198	12	32	2014	2014	NUM
fuelectenerg-198	12	33	corresponding	correspond	VERB
fuelectenerg-198	12	34	author	author	NOUN
fuelectenerg-198	12	35	:	:	PUNCT
fuelectenerg-198	12	36	nenad	nenad	PROPN
fuelectenerg-198	12	37	novkovski	novkovski	PROPN
fuelectenerg-198	12	38	institute	institute	PROPN
fuelectenerg-198	12	39	of	of	ADP
fuelectenerg-198	12	40	physics	physics	PROPN
fuelectenerg-198	12	41	,	,	PUNCT
fuelectenerg-198	12	42	faculty	faculty	NOUN
fuelectenerg-198	12	43	of	of	ADP
fuelectenerg-198	12	44	natural	natural	ADJ
fuelectenerg-198	12	45	sciences	science	NOUN
fuelectenerg-198	12	46	and	and	CCONJ
fuelectenerg-198	12	47	mathematics	mathematic	NOUN
fuelectenerg-198	12	48	,	,	PUNCT
fuelectenerg-198	12	49	university	university	NOUN
fuelectenerg-198	12	50	“	"	PUNCT
fuelectenerg-198	12	51	ss	ss	PROPN
fuelectenerg-198	12	52	.	.	PROPN
fuelectenerg-198	12	53	cyril	cyril	PROPN
fuelectenerg-198	12	54	and	and	CCONJ
fuelectenerg-198	12	55	methodius	methodius	PROPN
fuelectenerg-198	12	56	”	"	PUNCT
fuelectenerg-198	12	57	,	,	PUNCT
fuelectenerg-198	12	58	arhimedova	arhimedova	PROPN
fuelectenerg-198	12	59	3	3	NUM
fuelectenerg-198	12	60	,	,	PUNCT
fuelectenerg-198	12	61	1000	1000	NUM
fuelectenerg-198	12	62	skopje	skopje	NOUN
fuelectenerg-198	12	63	,	,	PUNCT
fuelectenerg-198	12	64	macedonia	macedonia	NOUN
fuelectenerg-198	12	65	(	(	PUNCT
fuelectenerg-198	12	66	e	e	NOUN
fuelectenerg-198	12	67	-	-	NOUN
fuelectenerg-198	12	68	mail	mail	NOUN
fuelectenerg-198	12	69	:	:	PUNCT
fuelectenerg-198	12	70	nenad@iunona.pmf.ukim.edu.mk	nenad@iunona.pmf.ukim.edu.mk	PROPN
fuelectenerg-198	12	71	)	)	PUNCT
fuelectenerg-198	12	72	260	260	NUM
fuelectenerg-198	12	73	n.	n.	NOUN
fuelectenerg-198	12	74	novkovski	novkovski	NOUN
fuelectenerg-198	12	75	further	far	ADV
fuelectenerg-198	12	76	by	by	ADP
fuelectenerg-198	12	77	doping	dope	VERB
fuelectenerg-198	12	78	with	with	ADP
fuelectenerg-198	12	79	convenient	convenient	ADJ
fuelectenerg-198	12	80	elements	element	NOUN
fuelectenerg-198	12	81	[	[	X
fuelectenerg-198	12	82	14	14	NUM
fuelectenerg-198	12	83	]	]	PUNCT
fuelectenerg-198	12	84	.	.	PUNCT
fuelectenerg-198	13	1	detailed	detailed	ADJ
fuelectenerg-198	13	2	studies	study	NOUN
fuelectenerg-198	13	3	of	of	ADP
fuelectenerg-198	13	4	the	the	DET
fuelectenerg-198	13	5	properties	property	NOUN
fuelectenerg-198	13	6	of	of	ADP
fuelectenerg-198	13	7	tantalum	tantalum	NOUN
fuelectenerg-198	13	8	pentoxide	pentoxide	NOUN
fuelectenerg-198	13	9	doped	dope	VERB
fuelectenerg-198	13	10	with	with	ADP
fuelectenerg-198	13	11	al	al	PROPN
fuelectenerg-198	13	12	,	,	PUNCT
fuelectenerg-198	13	13	ti	ti	PROPN
fuelectenerg-198	13	14	and	and	CCONJ
fuelectenerg-198	13	15	hf	hf	NOUN
fuelectenerg-198	13	16	and	and	CCONJ
fuelectenerg-198	13	17	mixed	mix	VERB
fuelectenerg-198	13	18	with	with	ADP
fuelectenerg-198	13	19	hfo2	hfo2	NOUN
fuelectenerg-198	13	20	have	have	AUX
fuelectenerg-198	13	21	been	be	AUX
fuelectenerg-198	13	22	reported	report	VERB
fuelectenerg-198	13	23	[	[	X
fuelectenerg-198	13	24	15][30	15][30	X
fuelectenerg-198	13	25	]	]	X
fuelectenerg-198	13	26	.	.	PUNCT
fuelectenerg-198	14	1	in	in	ADP
fuelectenerg-198	14	2	addition	addition	NOUN
fuelectenerg-198	14	3	,	,	PUNCT
fuelectenerg-198	14	4	it	it	PRON
fuelectenerg-198	14	5	has	have	AUX
fuelectenerg-198	14	6	been	be	AUX
fuelectenerg-198	14	7	shown	show	VERB
fuelectenerg-198	14	8	that	that	SCONJ
fuelectenerg-198	14	9	the	the	DET
fuelectenerg-198	14	10	nitridation	nitridation	NOUN
fuelectenerg-198	14	11	of	of	ADP
fuelectenerg-198	14	12	the	the	DET
fuelectenerg-198	14	13	si	si	NOUN
fuelectenerg-198	14	14	substrate	substrate	NOUN
fuelectenerg-198	14	15	improves	improve	VERB
fuelectenerg-198	14	16	substantially	substantially	ADV
fuelectenerg-198	14	17	electrical	electrical	ADJ
fuelectenerg-198	14	18	,	,	PUNCT
fuelectenerg-198	14	19	dielectric	dielectric	ADJ
fuelectenerg-198	14	20	and	and	CCONJ
fuelectenerg-198	14	21	reliability	reliability	NOUN
fuelectenerg-198	14	22	properties	property	NOUN
fuelectenerg-198	14	23	of	of	ADP
fuelectenerg-198	14	24	metal	metal	NOUN
fuelectenerg-198	14	25	-	-	PUNCT
fuelectenerg-198	14	26	high	high	ADJ
fuelectenerg-198	14	27	-	-	PUNCT
fuelectenerg-198	14	28	k	k	NOUN
fuelectenerg-198	14	29	-	-	PUNCT
fuelectenerg-198	14	30	si	si	ADJ
fuelectenerg-198	14	31	structures	structure	NOUN
fuelectenerg-198	14	32	[	[	X
fuelectenerg-198	14	33	31	31	NUM
fuelectenerg-198	14	34	]	]	PUNCT
fuelectenerg-198	14	35	.	.	PUNCT
fuelectenerg-198	15	1	in	in	ADP
fuelectenerg-198	15	2	[	[	X
fuelectenerg-198	15	3	32	32	NUM
fuelectenerg-198	15	4	]	]	PUNCT
fuelectenerg-198	15	5	we	we	PRON
fuelectenerg-198	15	6	described	describe	VERB
fuelectenerg-198	15	7	in	in	ADP
fuelectenerg-198	15	8	detail	detail	NOUN
fuelectenerg-198	15	9	a	a	DET
fuelectenerg-198	15	10	comprehensive	comprehensive	ADJ
fuelectenerg-198	15	11	model	model	NOUN
fuelectenerg-198	15	12	for	for	ADP
fuelectenerg-198	15	13	the	the	DET
fuelectenerg-198	15	14	i	i	PROPN
fuelectenerg-198	15	15	-	-	PUNCT
fuelectenerg-198	15	16	v	v	PROPN
fuelectenerg-198	15	17	characteristics	characteristic	NOUN
fuelectenerg-198	15	18	of	of	ADP
fuelectenerg-198	15	19	metal	metal	NOUN
fuelectenerg-198	15	20	-	-	PUNCT
fuelectenerg-198	15	21	ta2o5	ta2o5	PROPN
fuelectenerg-198	15	22	/	/	SYM
fuelectenerg-198	15	23	sio2	sio2	NOUN
fuelectenerg-198	15	24	-	-	PUNCT
fuelectenerg-198	15	25	si	si	ADJ
fuelectenerg-198	15	26	structures	structure	NOUN
fuelectenerg-198	15	27	.	.	PUNCT
fuelectenerg-198	16	1	in	in	ADP
fuelectenerg-198	16	2	this	this	DET
fuelectenerg-198	16	3	work	work	NOUN
fuelectenerg-198	16	4	we	we	PRON
fuelectenerg-198	16	5	present	present	VERB
fuelectenerg-198	16	6	integrally	integrally	ADV
fuelectenerg-198	16	7	the	the	DET
fuelectenerg-198	16	8	generalization	generalization	NOUN
fuelectenerg-198	16	9	of	of	ADP
fuelectenerg-198	16	10	the	the	DET
fuelectenerg-198	16	11	comprehensive	comprehensive	ADJ
fuelectenerg-198	16	12	model	model	NOUN
fuelectenerg-198	16	13	for	for	ADP
fuelectenerg-198	16	14	mis	mis	PROPN
fuelectenerg-198	16	15	structures	structure	NOUN
fuelectenerg-198	16	16	containing	contain	VERB
fuelectenerg-198	16	17	dielectric	dielectric	ADJ
fuelectenerg-198	16	18	stack	stack	NOUN
fuelectenerg-198	16	19	composed	compose	VERB
fuelectenerg-198	16	20	of	of	ADP
fuelectenerg-198	16	21	a	a	DET
fuelectenerg-198	16	22	high	high	ADJ
fuelectenerg-198	16	23	-	-	PUNCT
fuelectenerg-198	16	24	k	k	NOUN
fuelectenerg-198	16	25	dielectric	dielectric	NOUN
fuelectenerg-198	16	26	(	(	PUNCT
fuelectenerg-198	16	27	particularly	particularly	ADV
fuelectenerg-198	16	28	pure	pure	ADJ
fuelectenerg-198	16	29	and	and	CCONJ
fuelectenerg-198	16	30	doped	dope	VERB
fuelectenerg-198	16	31	ta2o5	ta2o5	PROPN
fuelectenerg-198	16	32	)	)	PUNCT
fuelectenerg-198	16	33	and	and	CCONJ
fuelectenerg-198	16	34	an	an	DET
fuelectenerg-198	16	35	interfacial	interfacial	ADJ
fuelectenerg-198	16	36	silicon	silicon	NOUN
fuelectenerg-198	16	37	dioxide	dioxide	NOUN
fuelectenerg-198	16	38	or	or	CCONJ
fuelectenerg-198	16	39	silicon	silicon	NOUN
fuelectenerg-198	16	40	oxynitride	oxynitride	ADJ
fuelectenerg-198	16	41	layer	layer	NOUN
fuelectenerg-198	16	42	and	and	CCONJ
fuelectenerg-198	16	43	review	review	VERB
fuelectenerg-198	16	44	the	the	DET
fuelectenerg-198	16	45	important	important	ADJ
fuelectenerg-198	16	46	results	result	NOUN
fuelectenerg-198	16	47	obtained	obtain	VERB
fuelectenerg-198	16	48	with	with	ADP
fuelectenerg-198	16	49	using	use	VERB
fuelectenerg-198	16	50	specific	specific	ADJ
fuelectenerg-198	16	51	cases	case	NOUN
fuelectenerg-198	16	52	of	of	ADP
fuelectenerg-198	16	53	this	this	DET
fuelectenerg-198	16	54	model	model	NOUN
fuelectenerg-198	16	55	for	for	ADP
fuelectenerg-198	16	56	various	various	ADJ
fuelectenerg-198	16	57	mos	mos	PROPN
fuelectenerg-198	16	58	structures	structure	NOUN
fuelectenerg-198	16	59	of	of	ADP
fuelectenerg-198	16	60	the	the	DET
fuelectenerg-198	16	61	considered	consider	VERB
fuelectenerg-198	16	62	type	type	NOUN
fuelectenerg-198	16	63	.	.	PUNCT
fuelectenerg-198	17	1	2	2	X
fuelectenerg-198	17	2	.	.	X
fuelectenerg-198	17	3	theoretical	theoretical	ADJ
fuelectenerg-198	17	4	model	model	NOUN
fuelectenerg-198	17	5	2.1	2.1	NUM
fuelectenerg-198	17	6	.	.	PUNCT
fuelectenerg-198	17	7	band	band	NOUN
fuelectenerg-198	17	8	diagram	diagram	NOUN
fuelectenerg-198	17	9	band	band	NOUN
fuelectenerg-198	17	10	diagram	diagram	NOUN
fuelectenerg-198	17	11	of	of	ADP
fuelectenerg-198	17	12	the	the	DET
fuelectenerg-198	17	13	considered	consider	VERB
fuelectenerg-198	17	14	structure	structure	NOUN
fuelectenerg-198	17	15	in	in	ADP
fuelectenerg-198	17	16	the	the	DET
fuelectenerg-198	17	17	case	case	NOUN
fuelectenerg-198	17	18	of	of	ADP
fuelectenerg-198	17	19	al	al	PROPN
fuelectenerg-198	17	20	gate	gate	PROPN
fuelectenerg-198	17	21	is	be	AUX
fuelectenerg-198	17	22	shown	show	VERB
fuelectenerg-198	17	23	in	in	ADP
fuelectenerg-198	17	24	fig	fig	NOUN
fuelectenerg-198	17	25	.	.	PUNCT
fuelectenerg-198	18	1	1	1	NUM
fuelectenerg-198	18	2	.	.	X
fuelectenerg-198	18	3	4	4	NUM
fuelectenerg-198	18	4	.0	.0	NUM
fuelectenerg-198	18	5	5	5	NUM
fuelectenerg-198	18	6	ev	ev	ADP
fuelectenerg-198	18	7	al	al	PROPN
fuelectenerg-198	18	8	4	4	NUM
fuelectenerg-198	18	9	.2	.2	NUM
fuelectenerg-198	18	10	5	5	NUM
fuelectenerg-198	18	11	ev	ev	ADP
fuelectenerg-198	18	12	vacuum	vacuum	NOUN
fuelectenerg-198	18	13	level	level	NOUN
fuelectenerg-198	18	14	ec	ec	PROPN
fuelectenerg-198	18	15			NOUN
fuelectenerg-198	18	16	e	e	NOUN
fuelectenerg-198	18	17			NOUN
fuelectenerg-198	18	18	h	h	NOUN
fuelectenerg-198	18	19	high	high	ADJ
fuelectenerg-198	18	20	-	-	PUNCT
fuelectenerg-198	18	21	k	k	NOUN
fuelectenerg-198	18	22			NOUN
fuelectenerg-198	18	23	e	e	NOUN
fuelectenerg-198	18	24	if	if	SCONJ
fuelectenerg-198	18	25	si	si	PROPN
fuelectenerg-198	18	26	1.12	1.12	NUM
fuelectenerg-198	18	27	ev	ev	DET
fuelectenerg-198	18	28	sio2	sio2	PROPN
fuelectenerg-198	18	29	or	or	CCONJ
fuelectenerg-198	18	30	sioxny	sioxny	VERB
fuelectenerg-198	18	31	ms	ms	PROPN
fuelectenerg-198	18	32	ef	ef	PROPN
fuelectenerg-198	18	33	ev	ev	VERB
fuelectenerg-198	18	34			PROPN
fuelectenerg-198	18	35	e	e	NOUN
fuelectenerg-198	18	36	'	'	PUNCT
fuelectenerg-198	18	37			X
fuelectenerg-198	18	38	e	e	PROPN
fuelectenerg-198	18	39	h	h	PROPN
fuelectenerg-198	18	40	k	k	PROPN
fuelectenerg-198	18	41	s		VERB
fuelectenerg-198	18	42			NOUN
fuelectenerg-198	18	43	h	h	NOUN
fuelectenerg-198	18	44	'	'	PUNCT
fuelectenerg-198	18	45	fig	fig	NOUN
fuelectenerg-198	18	46	.	.	PUNCT
fuelectenerg-198	19	1	1	1	NUM
fuelectenerg-198	19	2	band	band	NOUN
fuelectenerg-198	19	3	diagram	diagram	NOUN
fuelectenerg-198	19	4	of	of	ADP
fuelectenerg-198	19	5	the	the	DET
fuelectenerg-198	19	6	considered	consider	VERB
fuelectenerg-198	19	7	structure	structure	NOUN
fuelectenerg-198	19	8	in	in	ADP
fuelectenerg-198	19	9	fig	fig	NOUN
fuelectenerg-198	19	10	.	.	PUNCT
fuelectenerg-198	20	1	1	1	NUM
fuelectenerg-198	20	2	ehk	ehk	VERB
fuelectenerg-198	20	3	and	and	CCONJ
fuelectenerg-198	20	4	eif	eif	NOUN
fuelectenerg-198	20	5	are	be	AUX
fuelectenerg-198	20	6	the	the	DET
fuelectenerg-198	20	7	bandgaps	bandgap	NOUN
fuelectenerg-198	20	8	of	of	ADP
fuelectenerg-198	20	9	the	the	DET
fuelectenerg-198	20	10	high	high	ADJ
fuelectenerg-198	20	11	-	-	PUNCT
fuelectenerg-198	20	12	k	k	NOUN
fuelectenerg-198	20	13	and	and	CCONJ
fuelectenerg-198	20	14	the	the	DET
fuelectenerg-198	20	15	interfacial	interfacial	ADJ
fuelectenerg-198	20	16	layer	layer	NOUN
fuelectenerg-198	20	17	,	,	PUNCT
fuelectenerg-198	20	18	respectively	respectively	ADV
fuelectenerg-198	20	19	.	.	PUNCT
fuelectenerg-198	21	1	e	e	NOUN
fuelectenerg-198	21	2	'	'	PUNCT
fuelectenerg-198	21	3	and	and	CCONJ
fuelectenerg-198	21	4	h	h	PRON
fuelectenerg-198	21	5	'	'	PUNCT
fuelectenerg-198	21	6	are	be	AUX
fuelectenerg-198	21	7	band	band	NOUN
fuelectenerg-198	21	8	offsets	offset	NOUN
fuelectenerg-198	21	9	for	for	ADP
fuelectenerg-198	21	10	electrons	electron	NOUN
fuelectenerg-198	21	11	and	and	CCONJ
fuelectenerg-198	21	12	holes	hole	NOUN
fuelectenerg-198	21	13	,	,	PUNCT
fuelectenerg-198	21	14	respectively	respectively	ADV
fuelectenerg-198	21	15	,	,	PUNCT
fuelectenerg-198	21	16	at	at	ADP
fuelectenerg-198	21	17	the	the	DET
fuelectenerg-198	21	18	contact	contact	NOUN
fuelectenerg-198	21	19	between	between	ADP
fuelectenerg-198	21	20	the	the	DET
fuelectenerg-198	21	21	high	high	ADJ
fuelectenerg-198	21	22	-	-	PUNCT
fuelectenerg-198	21	23	k	k	NOUN
fuelectenerg-198	21	24	and	and	CCONJ
fuelectenerg-198	21	25	the	the	DET
fuelectenerg-198	21	26	interfacial	interfacial	ADJ
fuelectenerg-198	21	27	layer	layer	NOUN
fuelectenerg-198	21	28	,	,	PUNCT
fuelectenerg-198	21	29	while	while	SCONJ
fuelectenerg-198	21	30	e	e	NUM
fuelectenerg-198	21	31	and	and	CCONJ
fuelectenerg-198	21	32	h	h	PRON
fuelectenerg-198	21	33	are	be	AUX
fuelectenerg-198	21	34	band	band	NOUN
fuelectenerg-198	21	35	offsets	offset	NOUN
fuelectenerg-198	21	36	for	for	ADP
fuelectenerg-198	21	37	electrons	electron	NOUN
fuelectenerg-198	21	38	and	and	CCONJ
fuelectenerg-198	21	39	holes	hole	NOUN
fuelectenerg-198	21	40	,	,	PUNCT
fuelectenerg-198	21	41	respectively	respectively	ADV
fuelectenerg-198	21	42	,	,	PUNCT
fuelectenerg-198	21	43	at	at	ADP
fuelectenerg-198	21	44	the	the	DET
fuelectenerg-198	21	45	contact	contact	NOUN
fuelectenerg-198	21	46	between	between	ADP
fuelectenerg-198	21	47	the	the	DET
fuelectenerg-198	21	48	interfacial	interfacial	ADJ
fuelectenerg-198	21	49	layer	layer	NOUN
fuelectenerg-198	21	50	and	and	CCONJ
fuelectenerg-198	21	51	the	the	DET
fuelectenerg-198	21	52	silicon	silicon	NOUN
fuelectenerg-198	21	53	substrate	substrate	NOUN
fuelectenerg-198	21	54	.	.	PUNCT
fuelectenerg-198	22	1	ms	ms	PROPN
fuelectenerg-198	22	2	is	be	AUX
fuelectenerg-198	22	3	the	the	DET
fuelectenerg-198	22	4	work	work	NOUN
fuelectenerg-198	22	5	function	function	NOUN
fuelectenerg-198	22	6	difference	difference	NOUN
fuelectenerg-198	22	7	between	between	ADP
fuelectenerg-198	22	8	the	the	DET
fuelectenerg-198	22	9	metal	metal	NOUN
fuelectenerg-198	22	10	gate	gate	NOUN
fuelectenerg-198	22	11	and	and	CCONJ
fuelectenerg-198	22	12	si	si	INTJ
fuelectenerg-198	22	13	,	,	PUNCT
fuelectenerg-198	22	14	while	while	SCONJ
fuelectenerg-198	22	15	s	s	PROPN
fuelectenerg-198	22	16	is	be	AUX
fuelectenerg-198	22	17	the	the	DET
fuelectenerg-198	22	18	shottky	shottky	ADJ
fuelectenerg-198	22	19	barrier	barrier	NOUN
fuelectenerg-198	22	20	height	height	NOUN
fuelectenerg-198	22	21	for	for	ADP
fuelectenerg-198	22	22	electrons	electron	NOUN
fuelectenerg-198	22	23	.	.	PUNCT
fuelectenerg-198	23	1	in	in	ADP
fuelectenerg-198	23	2	the	the	DET
fuelectenerg-198	23	3	case	case	NOUN
fuelectenerg-198	23	4	of	of	ADP
fuelectenerg-198	23	5	al	al	PROPN
fuelectenerg-198	23	6	gate	gate	PROPN
fuelectenerg-198	23	7	,	,	PUNCT
fuelectenerg-198	23	8	ta2o5	ta2o5	PROPN
fuelectenerg-198	23	9	high	high	ADJ
fuelectenerg-198	23	10	-	-	PUNCT
fuelectenerg-198	23	11	k	k	NOUN
fuelectenerg-198	23	12	dielectric	dielectric	NOUN
fuelectenerg-198	23	13	and	and	CCONJ
fuelectenerg-198	23	14	sio2	sio2	VERB
fuelectenerg-198	23	15	interfacial	interfacial	ADJ
fuelectenerg-198	23	16	layer	layer	NOUN
fuelectenerg-198	23	17	the	the	DET
fuelectenerg-198	23	18	values	value	NOUN
fuelectenerg-198	23	19	are	be	AUX
fuelectenerg-198	23	20	those	those	PRON
fuelectenerg-198	23	21	summarized	summarize	VERB
fuelectenerg-198	23	22	in	in	ADP
fuelectenerg-198	23	23	table	table	NOUN
fuelectenerg-198	23	24	1	1	NUM
fuelectenerg-198	23	25	.	.	PUNCT
fuelectenerg-198	24	1	work	work	NOUN
fuelectenerg-198	24	2	function	function	NOUN
fuelectenerg-198	24	3	difference	difference	NOUN
fuelectenerg-198	24	4	,	,	PUNCT
fuelectenerg-198	24	5	ms	ms	PROPN
fuelectenerg-198	24	6	,	,	PUNCT
fuelectenerg-198	24	7	depends	depend	VERB
fuelectenerg-198	24	8	on	on	ADP
fuelectenerg-198	24	9	the	the	DET
fuelectenerg-198	24	10	si	si	NOUN
fuelectenerg-198	24	11	substrate	substrate	NOUN
fuelectenerg-198	24	12	doping	doping	NOUN
fuelectenerg-198	24	13	and	and	CCONJ
fuelectenerg-198	24	14	is	be	AUX
fuelectenerg-198	24	15	the	the	DET
fuelectenerg-198	24	16	same	same	ADJ
fuelectenerg-198	24	17	as	as	ADP
fuelectenerg-198	24	18	in	in	ADP
fuelectenerg-198	24	19	the	the	DET
fuelectenerg-198	24	20	case	case	NOUN
fuelectenerg-198	24	21	of	of	ADP
fuelectenerg-198	24	22	the	the	DET
fuelectenerg-198	24	23	corresponding	corresponding	ADJ
fuelectenerg-198	24	24	metal	metal	NOUN
fuelectenerg-198	24	25	-	-	PUNCT
fuelectenerg-198	24	26	sio2	sio2	NOUN
fuelectenerg-198	24	27	-	-	PUNCT
fuelectenerg-198	24	28	si	si	NOUN
fuelectenerg-198	24	29	structure	structure	NOUN
fuelectenerg-198	24	30	.	.	PUNCT
fuelectenerg-198	25	1	for	for	ADP
fuelectenerg-198	25	2	p	p	NOUN
fuelectenerg-198	25	3	-	-	PUNCT
fuelectenerg-198	25	4	type	type	NOUN
fuelectenerg-198	25	5	substrates	substrate	NOUN
fuelectenerg-198	25	6	it	it	PRON
fuelectenerg-198	25	7	is	be	AUX
fuelectenerg-198	25	8	around	around	ADV
fuelectenerg-198	25	9	0.5	0.5	NUM
fuelectenerg-198	25	10	ev	ev	NOUN
fuelectenerg-198	25	11	.	.	PROPN
fuelectenerg-198	25	12	table	table	NOUN
fuelectenerg-198	25	13	1	1	NUM
fuelectenerg-198	25	14	values	value	NOUN
fuelectenerg-198	25	15	of	of	ADP
fuelectenerg-198	25	16	bandgaps	bandgap	NOUN
fuelectenerg-198	25	17	and	and	CCONJ
fuelectenerg-198	25	18	band	band	NOUN
fuelectenerg-198	25	19	offsets	offset	NOUN
fuelectenerg-198	25	20	for	for	ADP
fuelectenerg-198	25	21	al	al	PROPN
fuelectenerg-198	25	22	-	-	PUNCT
fuelectenerg-198	25	23	ta2o5	ta2o5	PROPN
fuelectenerg-198	25	24	/	/	SYM
fuelectenerg-198	25	25	sio2	sio2	NOUN
fuelectenerg-198	25	26	-	-	PUNCT
fuelectenerg-198	25	27	si	si	PROPN
fuelectenerg-198	25	28	structures	structure	NOUN
fuelectenerg-198	25	29	ehk	ehk	ADJ
fuelectenerg-198	25	30	(	(	PUNCT
fuelectenerg-198	25	31	ev	ev	ADJ
fuelectenerg-198	25	32	)	)	PUNCT
fuelectenerg-198	25	33	eif	eif	NOUN
fuelectenerg-198	25	34	(	(	PUNCT
fuelectenerg-198	25	35	ev	ev	INTJ
fuelectenerg-198	25	36	)	)	PUNCT
fuelectenerg-198	25	37	e	e	NUM
fuelectenerg-198	25	38	(	(	PUNCT
fuelectenerg-198	25	39	ev	ev	NOUN
fuelectenerg-198	25	40	)	)	PUNCT
fuelectenerg-198	25	41	h	h	X
fuelectenerg-198	25	42	(	(	PUNCT
fuelectenerg-198	25	43	ev	ev	INTJ
fuelectenerg-198	25	44	)	)	PUNCT
fuelectenerg-198	25	45	e	e	NOUN
fuelectenerg-198	25	46	'	'	PUNCT
fuelectenerg-198	25	47	(	(	PUNCT
fuelectenerg-198	25	48	ev	ev	INTJ
fuelectenerg-198	25	49	)	)	PUNCT
fuelectenerg-198	25	50	h	h	PROPN
fuelectenerg-198	25	51	'	'	PUNCT
fuelectenerg-198	25	52	(	(	PUNCT
fuelectenerg-198	25	53	ev	ev	INTJ
fuelectenerg-198	25	54	)	)	PUNCT
fuelectenerg-198	25	55	s	s	PROPN
fuelectenerg-198	25	56	(	(	PUNCT
fuelectenerg-198	25	57	ev	ev	PART
fuelectenerg-198	25	58	)	)	PUNCT
fuelectenerg-198	25	59	8.97	8.97	NUM
fuelectenerg-198	25	60	4.4	4.4	NUM
fuelectenerg-198	25	61	3.15	3.15	NUM
fuelectenerg-198	25	62	4.97	4.97	NUM
fuelectenerg-198	25	63	3.06	3.06	NUM
fuelectenerg-198	25	64	1.51	1.51	NUM
fuelectenerg-198	25	65	0.29	0.29	NUM
fuelectenerg-198	25	66	physical	physical	ADJ
fuelectenerg-198	25	67	modeling	modeling	NOUN
fuelectenerg-198	25	68	of	of	ADP
fuelectenerg-198	25	69	ta2o5	ta2o5	PROPN
fuelectenerg-198	25	70	based	base	VERB
fuelectenerg-198	25	71	mos	mos	PROPN
fuelectenerg-198	25	72	capacitors	capacitor	NOUN
fuelectenerg-198	25	73	on	on	ADP
fuelectenerg-198	25	74	si	si	PROPN
fuelectenerg-198	25	75	261	261	NUM
fuelectenerg-198	25	76	2.2	2.2	NUM
fuelectenerg-198	25	77	.	.	PUNCT
fuelectenerg-198	26	1	conduction	conduction	NOUN
fuelectenerg-198	26	2	mechanisms	mechanism	VERB
fuelectenerg-198	26	3	the	the	DET
fuelectenerg-198	26	4	conduction	conduction	NOUN
fuelectenerg-198	26	5	mechanisms	mechanism	NOUN
fuelectenerg-198	26	6	that	that	PRON
fuelectenerg-198	26	7	have	have	VERB
fuelectenerg-198	26	8	to	to	PART
fuelectenerg-198	26	9	be	be	AUX
fuelectenerg-198	26	10	considered	consider	VERB
fuelectenerg-198	26	11	in	in	ADP
fuelectenerg-198	26	12	general	general	ADJ
fuelectenerg-198	26	13	case	case	NOUN
fuelectenerg-198	26	14	for	for	ADP
fuelectenerg-198	26	15	the	the	DET
fuelectenerg-198	26	16	interfacial	interfacial	ADJ
fuelectenerg-198	26	17	layer	layer	NOUN
fuelectenerg-198	26	18	are	be	AUX
fuelectenerg-198	26	19	:	:	PUNCT
fuelectenerg-198	26	20			ADJ
fuelectenerg-198	26	21	hopping	hop	VERB
fuelectenerg-198	26	22	conduction	conduction	NOUN
fuelectenerg-198	26	23	,	,	PUNCT
fuelectenerg-198	26	24	which	which	PRON
fuelectenerg-198	26	25	is	be	AUX
fuelectenerg-198	26	26	a	a	DET
fuelectenerg-198	26	27	result	result	NOUN
fuelectenerg-198	26	28	of	of	ADP
fuelectenerg-198	26	29	the	the	DET
fuelectenerg-198	26	30	quantum	quantum	NOUN
fuelectenerg-198	26	31	diffusion	diffusion	NOUN
fuelectenerg-198	26	32	of	of	ADP
fuelectenerg-198	26	33	electrons	electron	NOUN
fuelectenerg-198	26	34	between	between	ADP
fuelectenerg-198	26	35	the	the	DET
fuelectenerg-198	26	36	localized	localize	VERB
fuelectenerg-198	26	37	states	state	NOUN
fuelectenerg-198	26	38	in	in	ADP
fuelectenerg-198	26	39	the	the	DET
fuelectenerg-198	26	40	insulator	insulator	NOUN
fuelectenerg-198	26	41	,	,	PUNCT
fuelectenerg-198	26	42	typical	typical	ADJ
fuelectenerg-198	26	43	of	of	ADP
fuelectenerg-198	26	44	disordered	disordered	ADJ
fuelectenerg-198	26	45	materials	material	NOUN
fuelectenerg-198	26	46	.	.	PUNCT
fuelectenerg-198	27	1	this	this	PRON
fuelectenerg-198	27	2	is	be	AUX
fuelectenerg-198	27	3	a	a	DET
fuelectenerg-198	27	4	bulk	bulk	NOUN
fuelectenerg-198	27	5	-	-	PUNCT
fuelectenerg-198	27	6	limited	limit	VERB
fuelectenerg-198	27	7	conduction	conduction	NOUN
fuelectenerg-198	27	8	mechanism	mechanism	NOUN
fuelectenerg-198	27	9	,	,	PUNCT
fuelectenerg-198	27	10	and	and	CCONJ
fuelectenerg-198	27	11	hence	hence	ADV
fuelectenerg-198	27	12	it	it	PRON
fuelectenerg-198	27	13	does	do	AUX
fuelectenerg-198	27	14	not	not	PART
fuelectenerg-198	27	15	depend	depend	VERB
fuelectenerg-198	27	16	on	on	ADP
fuelectenerg-198	27	17	the	the	DET
fuelectenerg-198	27	18	gate	gate	NOUN
fuelectenerg-198	27	19	voltage	voltage	NOUN
fuelectenerg-198	27	20	polarity	polarity	NOUN
fuelectenerg-198	27	21	.	.	PUNCT
fuelectenerg-198	28	1	since	since	SCONJ
fuelectenerg-198	28	2	the	the	DET
fuelectenerg-198	28	3	current	current	ADJ
fuelectenerg-198	28	4	density	density	NOUN
fuelectenerg-198	28	5	in	in	ADP
fuelectenerg-198	28	6	this	this	DET
fuelectenerg-198	28	7	case	case	NOUN
fuelectenerg-198	28	8	is	be	AUX
fuelectenerg-198	28	9	a	a	DET
fuelectenerg-198	28	10	linear	linear	ADJ
fuelectenerg-198	28	11	function	function	NOUN
fuelectenerg-198	28	12	of	of	ADP
fuelectenerg-198	28	13	the	the	DET
fuelectenerg-198	28	14	electric	electric	NOUN
fuelectenerg-198	28	15	filed	file	VERB
fuelectenerg-198	28	16	,	,	PUNCT
fuelectenerg-198	28	17	we	we	PRON
fuelectenerg-198	28	18	can	can	AUX
fuelectenerg-198	28	19	consider	consider	VERB
fuelectenerg-198	28	20	it	it	PRON
fuelectenerg-198	28	21	as	as	ADP
fuelectenerg-198	28	22	a	a	DET
fuelectenerg-198	28	23	conductivity	conductivity	NOUN
fuelectenerg-198	28	24	of	of	ADP
fuelectenerg-198	28	25	ohmic	ohmic	ADJ
fuelectenerg-198	28	26	type	type	NOUN
fuelectenerg-198	28	27	.	.	PUNCT
fuelectenerg-198	29	1			PUNCT
fuelectenerg-198	30	1	the	the	DET
fuelectenerg-198	30	2	trap	trap	NOUN
fuelectenerg-198	30	3	-	-	PUNCT
fuelectenerg-198	30	4	assisted	assist	VERB
fuelectenerg-198	30	5	inelastic	inelastic	ADJ
fuelectenerg-198	30	6	tunneling	tunneling	NOUN
fuelectenerg-198	30	7	[	[	X
fuelectenerg-198	30	8	33]-[34	33]-[34	NOUN
fuelectenerg-198	30	9	]	]	PUNCT
fuelectenerg-198	30	10	.	.	PUNCT
fuelectenerg-198	31	1	electrons	electron	NOUN
fuelectenerg-198	31	2	tunnel	tunnel	VERB
fuelectenerg-198	31	3	from	from	ADP
fuelectenerg-198	31	4	the	the	DET
fuelectenerg-198	31	5	silicon	silicon	NOUN
fuelectenerg-198	31	6	to	to	ADP
fuelectenerg-198	31	7	the	the	DET
fuelectenerg-198	31	8	traps	trap	NOUN
fuelectenerg-198	31	9	in	in	ADP
fuelectenerg-198	31	10	the	the	DET
fuelectenerg-198	31	11	sio2	sio2	NOUN
fuelectenerg-198	31	12	layer	layer	NOUN
fuelectenerg-198	31	13	.	.	PUNCT
fuelectenerg-198	32	1	as	as	SCONJ
fuelectenerg-198	32	2	the	the	DET
fuelectenerg-198	32	3	sio2	sio2	PROPN
fuelectenerg-198	32	4	is	be	AUX
fuelectenerg-198	32	5	an	an	DET
fuelectenerg-198	32	6	amorphous	amorphous	ADJ
fuelectenerg-198	32	7	material	material	NOUN
fuelectenerg-198	32	8	with	with	ADP
fuelectenerg-198	32	9	low	low	ADJ
fuelectenerg-198	32	10	trap	trap	NOUN
fuelectenerg-198	32	11	density	density	NOUN
fuelectenerg-198	32	12	it	it	PRON
fuelectenerg-198	32	13	is	be	AUX
fuelectenerg-198	32	14	expected	expect	VERB
fuelectenerg-198	32	15	to	to	PART
fuelectenerg-198	32	16	observe	observe	VERB
fuelectenerg-198	32	17	this	this	DET
fuelectenerg-198	32	18	effect	effect	NOUN
fuelectenerg-198	32	19	only	only	ADV
fuelectenerg-198	32	20	in	in	ADP
fuelectenerg-198	32	21	the	the	DET
fuelectenerg-198	32	22	films	film	NOUN
fuelectenerg-198	32	23	where	where	SCONJ
fuelectenerg-198	32	24	the	the	DET
fuelectenerg-198	32	25	traps	trap	NOUN
fuelectenerg-198	32	26	are	be	AUX
fuelectenerg-198	32	27	created	create	VERB
fuelectenerg-198	32	28	as	as	ADP
fuelectenerg-198	32	29	a	a	DET
fuelectenerg-198	32	30	result	result	NOUN
fuelectenerg-198	32	31	of	of	ADP
fuelectenerg-198	32	32	a	a	DET
fuelectenerg-198	32	33	stress	stress	NOUN
fuelectenerg-198	32	34	,	,	PUNCT
fuelectenerg-198	32	35	radiation	radiation	NOUN
fuelectenerg-198	32	36	or	or	CCONJ
fuelectenerg-198	32	37	process	process	NOUN
fuelectenerg-198	32	38	induced	induce	VERB
fuelectenerg-198	32	39	damage	damage	NOUN
fuelectenerg-198	32	40	.	.	PUNCT
fuelectenerg-198	33	1	in	in	ADP
fuelectenerg-198	33	2	the	the	DET
fuelectenerg-198	33	3	case	case	NOUN
fuelectenerg-198	33	4	of	of	ADP
fuelectenerg-198	33	5	an	an	DET
fuelectenerg-198	33	6	sioxny	sioxny	PROPN
fuelectenerg-198	33	7	interfacial	interfacial	ADJ
fuelectenerg-198	33	8	layer	layer	NOUN
fuelectenerg-198	33	9	significantly	significantly	ADV
fuelectenerg-198	33	10	higher	high	ADJ
fuelectenerg-198	33	11	density	density	NOUN
fuelectenerg-198	33	12	of	of	ADP
fuelectenerg-198	33	13	traps	trap	NOUN
fuelectenerg-198	33	14	is	be	AUX
fuelectenerg-198	33	15	to	to	PART
fuelectenerg-198	33	16	be	be	AUX
fuelectenerg-198	33	17	expected	expect	VERB
fuelectenerg-198	33	18	.	.	PUNCT
fuelectenerg-198	34	1	however	however	ADV
fuelectenerg-198	34	2	,	,	PUNCT
fuelectenerg-198	34	3	this	this	DET
fuelectenerg-198	34	4	density	density	NOUN
fuelectenerg-198	34	5	is	be	AUX
fuelectenerg-198	34	6	still	still	ADV
fuelectenerg-198	34	7	very	very	ADV
fuelectenerg-198	34	8	low	low	ADJ
fuelectenerg-198	34	9	compared	compare	VERB
fuelectenerg-198	34	10	to	to	ADP
fuelectenerg-198	34	11	typically	typically	ADV
fuelectenerg-198	34	12	high	high	ADJ
fuelectenerg-198	34	13	density	density	NOUN
fuelectenerg-198	34	14	materials	material	NOUN
fuelectenerg-198	34	15	.	.	PUNCT
fuelectenerg-198	35	1			X
fuelectenerg-198	36	1	direct	direct	ADJ
fuelectenerg-198	36	2	tunneling	tunneling	NOUN
fuelectenerg-198	36	3	(	(	PUNCT
fuelectenerg-198	36	4	trough	trough	NOUN
fuelectenerg-198	36	5	a	a	DET
fuelectenerg-198	36	6	trapezoidal	trapezoidal	ADJ
fuelectenerg-198	36	7	barrier	barrier	NOUN
fuelectenerg-198	36	8	)	)	PUNCT
fuelectenerg-198	36	9	and	and	CCONJ
fuelectenerg-198	36	10	fowler	fowler	PROPN
fuelectenerg-198	36	11	-	-	PUNCT
fuelectenerg-198	36	12	nordheim	nordheim	PROPN
fuelectenerg-198	36	13	injection	injection	NOUN
fuelectenerg-198	36	14	(	(	PUNCT
fuelectenerg-198	36	15	trough	trough	NOUN
fuelectenerg-198	36	16	a	a	DET
fuelectenerg-198	36	17	triangular	triangular	NOUN
fuelectenerg-198	36	18	barrier	barrier	NOUN
fuelectenerg-198	36	19	)	)	PUNCT
fuelectenerg-198	36	20	into	into	ADP
fuelectenerg-198	36	21	interfacial	interfacial	ADJ
fuelectenerg-198	36	22	layer	layer	NOUN
fuelectenerg-198	36	23	.	.	PUNCT
fuelectenerg-198	37	1	tunneling	tunnel	VERB
fuelectenerg-198	37	2	current	current	NOUN
fuelectenerg-198	37	3	can	can	AUX
fuelectenerg-198	37	4	be	be	AUX
fuelectenerg-198	37	5	created	create	VERB
fuelectenerg-198	37	6	by	by	ADP
fuelectenerg-198	37	7	the	the	DET
fuelectenerg-198	37	8	electrons	electron	NOUN
fuelectenerg-198	37	9	or	or	CCONJ
fuelectenerg-198	37	10	the	the	DET
fuelectenerg-198	37	11	holes	hole	NOUN
fuelectenerg-198	37	12	from	from	ADP
fuelectenerg-198	37	13	the	the	DET
fuelectenerg-198	37	14	si	si	NOUN
fuelectenerg-198	37	15	substrate	substrate	NOUN
fuelectenerg-198	37	16	.	.	PUNCT
fuelectenerg-198	38	1	the	the	DET
fuelectenerg-198	38	2	barrier	barrier	NOUN
fuelectenerg-198	38	3	for	for	ADP
fuelectenerg-198	38	4	the	the	DET
fuelectenerg-198	38	5	tunneling	tunneling	NOUN
fuelectenerg-198	38	6	of	of	ADP
fuelectenerg-198	38	7	the	the	DET
fuelectenerg-198	38	8	holes	hole	NOUN
fuelectenerg-198	38	9	is	be	AUX
fuelectenerg-198	38	10	different	different	ADJ
fuelectenerg-198	38	11	from	from	ADP
fuelectenerg-198	38	12	that	that	PRON
fuelectenerg-198	38	13	for	for	ADP
fuelectenerg-198	38	14	the	the	DET
fuelectenerg-198	38	15	electrons	electron	NOUN
fuelectenerg-198	38	16	,	,	PUNCT
fuelectenerg-198	38	17	thus	thus	ADV
fuelectenerg-198	38	18	a	a	DET
fuelectenerg-198	38	19	remarkable	remarkable	ADJ
fuelectenerg-198	38	20	asymmetry	asymmetry	NOUN
fuelectenerg-198	38	21	can	can	AUX
fuelectenerg-198	38	22	be	be	AUX
fuelectenerg-198	38	23	observed	observe	VERB
fuelectenerg-198	38	24	between	between	ADP
fuelectenerg-198	38	25	the	the	DET
fuelectenerg-198	38	26	opposite	opposite	ADJ
fuelectenerg-198	38	27	polarities	polarity	NOUN
fuelectenerg-198	38	28	.	.	PUNCT
fuelectenerg-198	39	1	a	a	DET
fuelectenerg-198	39	2	particular	particular	ADJ
fuelectenerg-198	39	3	mechanism	mechanism	NOUN
fuelectenerg-198	39	4	involving	involve	VERB
fuelectenerg-198	39	5	both	both	DET
fuelectenerg-198	39	6	sioxny	sioxny	NOUN
fuelectenerg-198	39	7	and	and	CCONJ
fuelectenerg-198	39	8	high	high	ADJ
fuelectenerg-198	39	9	-	-	PUNCT
fuelectenerg-198	39	10	k	k	NOUN
fuelectenerg-198	39	11	is	be	AUX
fuelectenerg-198	39	12	the	the	DET
fuelectenerg-198	39	13	tunneling	tunneling	NOUN
fuelectenerg-198	39	14	through	through	ADP
fuelectenerg-198	39	15	double	double	ADJ
fuelectenerg-198	39	16	barrier	barrier	NOUN
fuelectenerg-198	39	17	(	(	PUNCT
fuelectenerg-198	39	18	through	through	ADP
fuelectenerg-198	39	19	a	a	DET
fuelectenerg-198	39	20	trapezoidal	trapezoidal	ADJ
fuelectenerg-198	39	21	barrier	barrier	NOUN
fuelectenerg-198	39	22	in	in	ADP
fuelectenerg-198	39	23	sio2	sio2	PROPN
fuelectenerg-198	39	24	and	and	CCONJ
fuelectenerg-198	39	25	a	a	DET
fuelectenerg-198	39	26	triangular	triangular	NOUN
fuelectenerg-198	39	27	barrier	barrier	NOUN
fuelectenerg-198	39	28	in	in	ADP
fuelectenerg-198	39	29	high	high	ADJ
fuelectenerg-198	39	30	-	-	PUNCT
fuelectenerg-198	39	31	k	k	NOUN
fuelectenerg-198	39	32	)	)	PUNCT
fuelectenerg-198	39	33	.	.	PUNCT
fuelectenerg-198	40	1	the	the	DET
fuelectenerg-198	40	2	conduction	conduction	NOUN
fuelectenerg-198	40	3	mechanisms	mechanism	NOUN
fuelectenerg-198	40	4	that	that	PRON
fuelectenerg-198	40	5	have	have	VERB
fuelectenerg-198	40	6	to	to	PART
fuelectenerg-198	40	7	be	be	AUX
fuelectenerg-198	40	8	considered	consider	VERB
fuelectenerg-198	40	9	for	for	ADP
fuelectenerg-198	40	10	the	the	DET
fuelectenerg-198	40	11	high	high	ADJ
fuelectenerg-198	40	12	-	-	PUNCT
fuelectenerg-198	40	13	k	k	NOUN
fuelectenerg-198	40	14	dielectric	dielectric	NOUN
fuelectenerg-198	40	15	are	be	AUX
fuelectenerg-198	40	16	:	:	PUNCT
fuelectenerg-198	40	17			X
fuelectenerg-198	40	18	poole	poole	ADJ
fuelectenerg-198	40	19	-	-	PUNCT
fuelectenerg-198	40	20	frenkel	frenkel	NOUN
fuelectenerg-198	40	21	mechanism	mechanism	NOUN
fuelectenerg-198	40	22	,	,	PUNCT
fuelectenerg-198	40	23	which	which	PRON
fuelectenerg-198	40	24	is	be	AUX
fuelectenerg-198	40	25	bulk	bulk	NOUN
fuelectenerg-198	40	26	-	-	PUNCT
fuelectenerg-198	40	27	limited	limited	ADJ
fuelectenerg-198	40	28	,	,	PUNCT
fuelectenerg-198	40	29	and	and	CCONJ
fuelectenerg-198	40	30	hence	hence	ADV
fuelectenerg-198	40	31	independent	independent	ADJ
fuelectenerg-198	40	32	on	on	ADP
fuelectenerg-198	40	33	the	the	DET
fuelectenerg-198	40	34	gate	gate	NOUN
fuelectenerg-198	40	35	bias	bias	NOUN
fuelectenerg-198	40	36	polarity	polarity	NOUN
fuelectenerg-198	40	37	.	.	PUNCT
fuelectenerg-198	41	1	electrons	electron	NOUN
fuelectenerg-198	41	2	are	be	AUX
fuelectenerg-198	41	3	exited	exit	VERB
fuelectenerg-198	41	4	to	to	ADP
fuelectenerg-198	41	5	the	the	DET
fuelectenerg-198	41	6	conduction	conduction	NOUN
fuelectenerg-198	41	7	band	band	NOUN
fuelectenerg-198	41	8	from	from	ADP
fuelectenerg-198	41	9	the	the	DET
fuelectenerg-198	41	10	traps	trap	NOUN
fuelectenerg-198	41	11	by	by	ADP
fuelectenerg-198	41	12	field	field	NOUN
fuelectenerg-198	41	13	-	-	PUNCT
fuelectenerg-198	41	14	enhanced	enhance	VERB
fuelectenerg-198	41	15	thermal	thermal	ADJ
fuelectenerg-198	41	16	emission	emission	NOUN
fuelectenerg-198	41	17	and	and	CCONJ
fuelectenerg-198	41	18	they	they	PRON
fuelectenerg-198	41	19	drift	drift	VERB
fuelectenerg-198	41	20	trough	trough	NOUN
fuelectenerg-198	41	21	the	the	DET
fuelectenerg-198	41	22	layer	layer	NOUN
fuelectenerg-198	41	23	.	.	PUNCT
fuelectenerg-198	42	1	because	because	SCONJ
fuelectenerg-198	42	2	of	of	ADP
fuelectenerg-198	42	3	the	the	DET
fuelectenerg-198	42	4	high	high	ADJ
fuelectenerg-198	42	5	defect	defect	NOUN
fuelectenerg-198	42	6	density	density	NOUN
fuelectenerg-198	42	7	,	,	PUNCT
fuelectenerg-198	42	8	they	they	PRON
fuelectenerg-198	42	9	are	be	AUX
fuelectenerg-198	42	10	easily	easily	ADV
fuelectenerg-198	42	11	trapped	trap	VERB
fuelectenerg-198	42	12	by	by	ADP
fuelectenerg-198	42	13	other	other	ADJ
fuelectenerg-198	42	14	positively	positively	ADV
fuelectenerg-198	42	15	charged	charge	VERB
fuelectenerg-198	42	16	defects	defect	NOUN
fuelectenerg-198	42	17	.	.	PUNCT
fuelectenerg-198	43	1	new	new	ADJ
fuelectenerg-198	43	2	electrons	electron	NOUN
fuelectenerg-198	43	3	are	be	AUX
fuelectenerg-198	43	4	released	release	VERB
fuelectenerg-198	43	5	from	from	ADP
fuelectenerg-198	43	6	other	other	ADJ
fuelectenerg-198	43	7	traps	trap	NOUN
fuelectenerg-198	43	8	,	,	PUNCT
fuelectenerg-198	43	9	thus	thus	ADV
fuelectenerg-198	43	10	transporting	transport	VERB
fuelectenerg-198	43	11	the	the	DET
fuelectenerg-198	43	12	charge	charge	NOUN
fuelectenerg-198	43	13	step	step	NOUN
fuelectenerg-198	43	14	by	by	ADP
fuelectenerg-198	43	15	step	step	NOUN
fuelectenerg-198	43	16	from	from	ADP
fuelectenerg-198	43	17	one	one	NUM
fuelectenerg-198	43	18	surface	surface	NOUN
fuelectenerg-198	43	19	of	of	ADP
fuelectenerg-198	43	20	the	the	DET
fuelectenerg-198	43	21	film	film	NOUN
fuelectenerg-198	43	22	to	to	ADP
fuelectenerg-198	43	23	the	the	DET
fuelectenerg-198	43	24	opposite	opposite	ADJ
fuelectenerg-198	43	25	(	(	PUNCT
fuelectenerg-198	43	26	fig	fig	NOUN
fuelectenerg-198	43	27	.	.	PUNCT
fuelectenerg-198	44	1	2	2	NUM
fuelectenerg-198	44	2	)	)	PUNCT
fuelectenerg-198	44	3	.	.	PUNCT
fuelectenerg-198	45	1	when	when	SCONJ
fuelectenerg-198	45	2	the	the	DET
fuelectenerg-198	45	3	gate	gate	NOUN
fuelectenerg-198	45	4	is	be	AUX
fuelectenerg-198	45	5	negative	negative	ADJ
fuelectenerg-198	45	6	,	,	PUNCT
fuelectenerg-198	45	7	electron	electron	NOUN
fuelectenerg-198	45	8	needs	need	VERB
fuelectenerg-198	45	9	first	first	ADV
fuelectenerg-198	45	10	to	to	PART
fuelectenerg-198	45	11	enter	enter	VERB
fuelectenerg-198	45	12	the	the	DET
fuelectenerg-198	45	13	insulator	insulator	NOUN
fuelectenerg-198	45	14	from	from	ADP
fuelectenerg-198	45	15	the	the	DET
fuelectenerg-198	45	16	metal	metal	NOUN
fuelectenerg-198	45	17	gate	gate	NOUN
fuelectenerg-198	45	18	.	.	PUNCT
fuelectenerg-198	46	1	it	it	PRON
fuelectenerg-198	46	2	is	be	AUX
fuelectenerg-198	46	3	to	to	PART
fuelectenerg-198	46	4	be	be	AUX
fuelectenerg-198	46	5	noted	note	VERB
fuelectenerg-198	46	6	that	that	SCONJ
fuelectenerg-198	46	7	they	they	PRON
fuelectenerg-198	46	8	do	do	AUX
fuelectenerg-198	46	9	not	not	PART
fuelectenerg-198	46	10	need	need	VERB
fuelectenerg-198	46	11	to	to	PART
fuelectenerg-198	46	12	obtain	obtain	VERB
fuelectenerg-198	46	13	enough	enough	ADJ
fuelectenerg-198	46	14	energy	energy	NOUN
fuelectenerg-198	46	15	to	to	PART
fuelectenerg-198	46	16	enter	enter	VERB
fuelectenerg-198	46	17	the	the	DET
fuelectenerg-198	46	18	conduction	conduction	NOUN
fuelectenerg-198	46	19	band	band	NOUN
fuelectenerg-198	46	20	,	,	PUNCT
fuelectenerg-198	46	21	but	but	CCONJ
fuelectenerg-198	46	22	just	just	ADV
fuelectenerg-198	46	23	to	to	PART
fuelectenerg-198	46	24	move	move	VERB
fuelectenerg-198	46	25	to	to	ADP
fuelectenerg-198	46	26	a	a	DET
fuelectenerg-198	46	27	defect	defect	NOUN
fuelectenerg-198	46	28	-	-	PUNCT
fuelectenerg-198	46	29	related	relate	VERB
fuelectenerg-198	46	30	state	state	NOUN
fuelectenerg-198	46	31	in	in	ADP
fuelectenerg-198	46	32	the	the	DET
fuelectenerg-198	46	33	vicinity	vicinity	NOUN
fuelectenerg-198	46	34	of	of	ADP
fuelectenerg-198	46	35	the	the	DET
fuelectenerg-198	46	36	metal	metal	NOUN
fuelectenerg-198	46	37	surface	surface	NOUN
fuelectenerg-198	46	38	.	.	PUNCT
fuelectenerg-198	47	1	the	the	DET
fuelectenerg-198	47	2	activation	activation	NOUN
fuelectenerg-198	47	3	energies	energy	NOUN
fuelectenerg-198	47	4	of	of	ADP
fuelectenerg-198	47	5	the	the	DET
fuelectenerg-198	47	6	defects	defect	NOUN
fuelectenerg-198	47	7	responsible	responsible	ADJ
fuelectenerg-198	47	8	for	for	ADP
fuelectenerg-198	47	9	the	the	DET
fuelectenerg-198	47	10	poole	poole	ADJ
fuelectenerg-198	47	11	-	-	PUNCT
fuelectenerg-198	47	12	frenkel	frenkel	NOUN
fuelectenerg-198	47	13	emission	emission	NOUN
fuelectenerg-198	47	14	in	in	ADP
fuelectenerg-198	47	15	the	the	DET
fuelectenerg-198	47	16	ta2o5	ta2o5	PROPN
fuelectenerg-198	47	17	are	be	AUX
fuelectenerg-198	47	18	0.2	0.2	NUM
fuelectenerg-198	47	19	ev	ev	NOUN
fuelectenerg-198	47	20	(	(	PUNCT
fuelectenerg-198	47	21	type	type	NOUN
fuelectenerg-198	47	22	a	a	PRON
fuelectenerg-198	47	23	,	,	PUNCT
fuelectenerg-198	47	24	[	[	X
fuelectenerg-198	47	25	35	35	NUM
fuelectenerg-198	47	26	]	]	PUNCT
fuelectenerg-198	47	27	)	)	PUNCT
fuelectenerg-198	47	28	and	and	CCONJ
fuelectenerg-198	47	29	0.8	0.8	NUM
fuelectenerg-198	47	30	ev	ev	NOUN
fuelectenerg-198	47	31	(	(	PUNCT
fuelectenerg-198	47	32	type	type	NOUN
fuelectenerg-198	47	33	d	d	NOUN
fuelectenerg-198	47	34	,	,	PUNCT
fuelectenerg-198	47	35	must	must	AUX
fuelectenerg-198	47	36	probably	probably	ADV
fuelectenerg-198	47	37	the	the	DET
fuelectenerg-198	47	38	first	first	ADJ
fuelectenerg-198	47	39	ionization	ionization	NOUN
fuelectenerg-198	47	40	level	level	NOUN
fuelectenerg-198	47	41	of	of	ADP
fuelectenerg-198	47	42	the	the	DET
fuelectenerg-198	47	43	double	double	ADJ
fuelectenerg-198	47	44	-	-	PUNCT
fuelectenerg-198	47	45	donor	donor	NOUN
fuelectenerg-198	47	46	oxygen	oxygen	NOUN
fuelectenerg-198	47	47	vacancy	vacancy	NOUN
fuelectenerg-198	47	48	,	,	PUNCT
fuelectenerg-198	47	49	[	[	X
fuelectenerg-198	47	50	36	36	NUM
fuelectenerg-198	47	51	]	]	NUM
fuelectenerg-198	47	52	)	)	PUNCT
fuelectenerg-198	47	53	.	.	PUNCT
fuelectenerg-198	48	1	they	they	PRON
fuelectenerg-198	48	2	are	be	AUX
fuelectenerg-198	48	3	close	close	ADJ
fuelectenerg-198	48	4	to	to	ADP
fuelectenerg-198	48	5	or	or	CCONJ
fuelectenerg-198	48	6	lower	low	ADJ
fuelectenerg-198	48	7	than	than	ADP
fuelectenerg-198	48	8	the	the	DET
fuelectenerg-198	48	9	metal	metal	NOUN
fuelectenerg-198	48	10	-	-	PUNCT
fuelectenerg-198	48	11	gate	gate	NOUN
fuelectenerg-198	48	12	fermi	fermi	NOUN
fuelectenerg-198	48	13	level	level	NOUN
fuelectenerg-198	48	14	(	(	PUNCT
fuelectenerg-198	48	15	0.29	0.29	NUM
fuelectenerg-198	48	16	ev	ev	X
fuelectenerg-198	48	17	under	under	ADP
fuelectenerg-198	48	18	the	the	DET
fuelectenerg-198	48	19	conduction	conduction	NOUN
fuelectenerg-198	48	20	band	band	NOUN
fuelectenerg-198	48	21	of	of	ADP
fuelectenerg-198	48	22	ta2o5	ta2o5	PROPN
fuelectenerg-198	48	23	.	.	PUNCT
fuelectenerg-198	49	1	we	we	PRON
fuelectenerg-198	49	2	estimated	estimate	VERB
fuelectenerg-198	49	3	the	the	DET
fuelectenerg-198	49	4	tunneling	tunneling	NOUN
fuelectenerg-198	49	5	probability	probability	NOUN
fuelectenerg-198	49	6	from	from	ADP
fuelectenerg-198	49	7	the	the	DET
fuelectenerg-198	49	8	al	al	PROPN
fuelectenerg-198	49	9	-	-	PUNCT
fuelectenerg-198	49	10	gate	gate	NOUN
fuelectenerg-198	49	11	to	to	ADP
fuelectenerg-198	49	12	the	the	DET
fuelectenerg-198	49	13	neighboring	neighboring	NOUN
fuelectenerg-198	49	14	traps	trap	NOUN
fuelectenerg-198	49	15	to	to	PART
fuelectenerg-198	49	16	be	be	AUX
fuelectenerg-198	49	17	so	so	ADV
fuelectenerg-198	49	18	high	high	ADJ
fuelectenerg-198	49	19	that	that	SCONJ
fuelectenerg-198	49	20	extremely	extremely	ADV
fuelectenerg-198	49	21	high	high	ADJ
fuelectenerg-198	49	22	current	current	ADJ
fuelectenerg-198	49	23	densities	density	NOUN
fuelectenerg-198	49	24	of	of	ADP
fuelectenerg-198	49	25	order	order	NOUN
fuelectenerg-198	49	26	of	of	ADP
fuelectenerg-198	49	27	100	100	NUM
fuelectenerg-198	49	28	a	a	DET
fuelectenerg-198	49	29	/	/	SYM
fuelectenerg-198	49	30	cm	cm	NOUN
fuelectenerg-198	49	31	2	2	NUM
fuelectenerg-198	49	32	can	can	AUX
fuelectenerg-198	49	33	be	be	AUX
fuelectenerg-198	49	34	attained	attain	VERB
fuelectenerg-198	49	35	for	for	ADP
fuelectenerg-198	49	36	a	a	DET
fuelectenerg-198	49	37	voltage	voltage	NOUN
fuelectenerg-198	49	38	drop	drop	NOUN
fuelectenerg-198	49	39	of	of	ADP
fuelectenerg-198	49	40	only	only	ADV
fuelectenerg-198	49	41	few	few	ADJ
fuelectenerg-198	49	42	mv	mv	PROPN
fuelectenerg-198	49	43	.	.	PROPN
fuelectenerg-198	49	44			X
fuelectenerg-198	50	1	shottky	shottky	ADJ
fuelectenerg-198	50	2	emission	emission	NOUN
fuelectenerg-198	50	3	,	,	PUNCT
fuelectenerg-198	50	4	which	which	PRON
fuelectenerg-198	50	5	is	be	AUX
fuelectenerg-198	50	6	an	an	DET
fuelectenerg-198	50	7	electrode	electrode	NOUN
fuelectenerg-198	50	8	-	-	PUNCT
fuelectenerg-198	50	9	limited	limit	VERB
fuelectenerg-198	50	10	effect	effect	NOUN
fuelectenerg-198	50	11	.	.	PUNCT
fuelectenerg-198	51	1	schottky	schottky	NOUN
fuelectenerg-198	51	2	conduction	conduction	NOUN
fuelectenerg-198	51	3	is	be	AUX
fuelectenerg-198	51	4	excluded	exclude	VERB
fuelectenerg-198	51	5	for	for	ADP
fuelectenerg-198	51	6	gate	gate	NOUN
fuelectenerg-198	51	7	positively	positively	ADV
fuelectenerg-198	51	8	biased	bias	VERB
fuelectenerg-198	51	9	,	,	PUNCT
fuelectenerg-198	51	10	because	because	SCONJ
fuelectenerg-198	51	11	the	the	DET
fuelectenerg-198	51	12	side	side	NOUN
fuelectenerg-198	51	13	of	of	ADP
fuelectenerg-198	51	14	the	the	DET
fuelectenerg-198	51	15	high	high	ADJ
fuelectenerg-198	51	16	-	-	PUNCT
fuelectenerg-198	51	17	k	k	NOUN
fuelectenerg-198	51	18	layer	layer	NOUN
fuelectenerg-198	51	19	near	near	ADP
fuelectenerg-198	51	20	the	the	DET
fuelectenerg-198	51	21	negative	negative	ADJ
fuelectenerg-198	51	22	electrode	electrode	NOUN
fuelectenerg-198	51	23	is	be	AUX
fuelectenerg-198	51	24	not	not	PART
fuelectenerg-198	51	25	in	in	ADP
fuelectenerg-198	51	26	direct	direct	ADJ
fuelectenerg-198	51	27	contact	contact	NOUN
fuelectenerg-198	51	28	with	with	ADP
fuelectenerg-198	51	29	a	a	DET
fuelectenerg-198	51	30	metal	metal	NOUN
fuelectenerg-198	51	31	or	or	CCONJ
fuelectenerg-198	51	32	semiconductor	semiconductor	NOUN
fuelectenerg-198	51	33	.	.	PUNCT
fuelectenerg-198	52	1	for	for	SCONJ
fuelectenerg-198	52	2	the	the	DET
fuelectenerg-198	52	3	gate	gate	NOUN
fuelectenerg-198	52	4	negatively	negatively	ADV
fuelectenerg-198	52	5	biased	biased	ADJ
fuelectenerg-198	52	6	,	,	PUNCT
fuelectenerg-198	52	7	the	the	DET
fuelectenerg-198	52	8	barrier	barrier	NOUN
fuelectenerg-198	52	9	is	be	AUX
fuelectenerg-198	52	10	low	low	ADJ
fuelectenerg-198	52	11	(	(	PUNCT
fuelectenerg-198	52	12	for	for	ADP
fuelectenerg-198	52	13	ta2o5	ta2o5	PROPN
fuelectenerg-198	52	14	only	only	ADV
fuelectenerg-198	52	15	0.29	0.29	NUM
fuelectenerg-198	52	16	ev	ev	NOUN
fuelectenerg-198	52	17	)	)	PUNCT
fuelectenerg-198	52	18	,	,	PUNCT
fuelectenerg-198	52	19	and	and	CCONJ
fuelectenerg-198	52	20	hence	hence	ADV
fuelectenerg-198	52	21	the	the	DET
fuelectenerg-198	52	22	schottky	schottky	NOUN
fuelectenerg-198	52	23	emission	emission	NOUN
fuelectenerg-198	52	24	is	be	AUX
fuelectenerg-198	52	25	to	to	PART
fuelectenerg-198	52	26	be	be	AUX
fuelectenerg-198	52	27	expected	expect	VERB
fuelectenerg-198	52	28	.	.	PUNCT
fuelectenerg-198	53	1	however	however	ADV
fuelectenerg-198	53	2	,	,	PUNCT
fuelectenerg-198	53	3	it	it	PRON
fuelectenerg-198	53	4	is	be	AUX
fuelectenerg-198	53	5	not	not	PART
fuelectenerg-198	53	6	expected	expect	VERB
fuelectenerg-198	53	7	to	to	PART
fuelectenerg-198	53	8	be	be	AUX
fuelectenerg-198	53	9	a	a	DET
fuelectenerg-198	53	10	currentlimiting	currentlimite	VERB
fuelectenerg-198	53	11	mechanism	mechanism	NOUN
fuelectenerg-198	53	12	,	,	PUNCT
fuelectenerg-198	53	13	because	because	SCONJ
fuelectenerg-198	53	14	thus	thus	ADV
fuelectenerg-198	53	15	injected	inject	VERB
fuelectenerg-198	53	16	electrons	electron	NOUN
fuelectenerg-198	53	17	are	be	AUX
fuelectenerg-198	53	18	quickly	quickly	ADV
fuelectenerg-198	53	19	trapped	trap	VERB
fuelectenerg-198	53	20	in	in	ADP
fuelectenerg-198	53	21	the	the	DET
fuelectenerg-198	53	22	the	the	DET
fuelectenerg-198	53	23	high	high	ADJ
fuelectenerg-198	53	24	-	-	PUNCT
fuelectenerg-198	53	25	k	k	NOUN
fuelectenerg-198	53	26	layer	layer	NOUN
fuelectenerg-198	53	27	near	near	ADP
fuelectenerg-198	53	28	the	the	DET
fuelectenerg-198	53	29	contact	contact	NOUN
fuelectenerg-198	53	30	with	with	ADP
fuelectenerg-198	53	31	the	the	DET
fuelectenerg-198	53	32	metal	metal	NOUN
fuelectenerg-198	53	33	,	,	PUNCT
fuelectenerg-198	53	34	continuing	continue	VERB
fuelectenerg-198	53	35	the	the	DET
fuelectenerg-198	53	36	transport	transport	NOUN
fuelectenerg-198	53	37	by	by	ADP
fuelectenerg-198	53	38	the	the	DET
fuelectenerg-198	53	39	poole262	poole262	PROPN
fuelectenerg-198	53	40	n.	n.	PROPN
fuelectenerg-198	53	41	novkovski	novkovski	PROPN
fuelectenerg-198	53	42	frenkel	frenkel	PROPN
fuelectenerg-198	53	43	emission	emission	NOUN
fuelectenerg-198	53	44	from	from	ADP
fuelectenerg-198	53	45	the	the	DET
fuelectenerg-198	53	46	traps	trap	NOUN
fuelectenerg-198	53	47	.	.	PUNCT
fuelectenerg-198	54	1	namely	namely	ADV
fuelectenerg-198	54	2	,	,	PUNCT
fuelectenerg-198	54	3	the	the	DET
fuelectenerg-198	54	4	pure	pure	ADJ
fuelectenerg-198	54	5	schottky	schottky	NOUN
fuelectenerg-198	54	6	effect	effect	NOUN
fuelectenerg-198	54	7	occurs	occur	VERB
fuelectenerg-198	54	8	when	when	SCONJ
fuelectenerg-198	54	9	electrons	electron	NOUN
fuelectenerg-198	54	10	are	be	AUX
fuelectenerg-198	54	11	injected	inject	VERB
fuelectenerg-198	54	12	from	from	ADP
fuelectenerg-198	54	13	the	the	DET
fuelectenerg-198	54	14	metal	metal	NOUN
fuelectenerg-198	54	15	in	in	ADP
fuelectenerg-198	54	16	vacuum	vacuum	NOUN
fuelectenerg-198	54	17	.	.	PUNCT
fuelectenerg-198	55	1	the	the	DET
fuelectenerg-198	55	2	situation	situation	NOUN
fuelectenerg-198	55	3	is	be	AUX
fuelectenerg-198	55	4	similar	similar	ADJ
fuelectenerg-198	55	5	when	when	SCONJ
fuelectenerg-198	55	6	they	they	PRON
fuelectenerg-198	55	7	are	be	AUX
fuelectenerg-198	55	8	injected	inject	VERB
fuelectenerg-198	55	9	in	in	ADP
fuelectenerg-198	55	10	a	a	DET
fuelectenerg-198	55	11	medium	medium	NOUN
fuelectenerg-198	55	12	where	where	SCONJ
fuelectenerg-198	55	13	they	they	PRON
fuelectenerg-198	55	14	can	can	AUX
fuelectenerg-198	55	15	almost	almost	ADV
fuelectenerg-198	55	16	freely	freely	ADV
fuelectenerg-198	55	17	traverse	traverse	VERB
fuelectenerg-198	55	18	the	the	DET
fuelectenerg-198	55	19	distance	distance	NOUN
fuelectenerg-198	55	20	from	from	ADP
fuelectenerg-198	55	21	the	the	DET
fuelectenerg-198	55	22	injecting	injecting	NOUN
fuelectenerg-198	55	23	to	to	ADP
fuelectenerg-198	55	24	the	the	DET
fuelectenerg-198	55	25	opposite	opposite	ADJ
fuelectenerg-198	55	26	electrode	electrode	NOUN
fuelectenerg-198	55	27	,	,	PUNCT
fuelectenerg-198	55	28	as	as	SCONJ
fuelectenerg-198	55	29	is	be	AUX
fuelectenerg-198	55	30	the	the	DET
fuelectenerg-198	55	31	case	case	NOUN
fuelectenerg-198	55	32	with	with	ADP
fuelectenerg-198	55	33	the	the	DET
fuelectenerg-198	55	34	ultra	ultra	ADJ
fuelectenerg-198	55	35	-	-	ADJ
fuelectenerg-198	55	36	thin	thin	ADJ
fuelectenerg-198	55	37	sio2	sio2	NOUN
fuelectenerg-198	55	38	or	or	CCONJ
fuelectenerg-198	55	39	sioxny	sioxny	VERB
fuelectenerg-198	55	40	if	if	SCONJ
fuelectenerg-198	55	41	the	the	DET
fuelectenerg-198	55	42	defect	defect	NOUN
fuelectenerg-198	55	43	density	density	NOUN
fuelectenerg-198	55	44	is	be	AUX
fuelectenerg-198	55	45	fairly	fairly	ADV
fuelectenerg-198	55	46	low	low	ADJ
fuelectenerg-198	55	47	.	.	PUNCT
fuelectenerg-198	56	1	for	for	ADP
fuelectenerg-198	56	2	metals	metal	NOUN
fuelectenerg-198	56	3	with	with	ADP
fuelectenerg-198	56	4	higher	high	ADJ
fuelectenerg-198	56	5	absolute	absolute	ADJ
fuelectenerg-198	56	6	values	value	NOUN
fuelectenerg-198	56	7	of	of	ADP
fuelectenerg-198	56	8	the	the	DET
fuelectenerg-198	56	9	work	work	NOUN
fuelectenerg-198	56	10	functions	function	NOUN
fuelectenerg-198	56	11	this	this	DET
fuelectenerg-198	56	12	issue	issue	NOUN
fuelectenerg-198	56	13	requires	require	VERB
fuelectenerg-198	56	14	further	further	ADJ
fuelectenerg-198	56	15	consideration	consideration	NOUN
fuelectenerg-198	56	16	.	.	PUNCT
fuelectenerg-198	57	1	we	we	PRON
fuelectenerg-198	57	2	observed	observe	VERB
fuelectenerg-198	57	3	a	a	DET
fuelectenerg-198	57	4	particular	particular	ADJ
fuelectenerg-198	57	5	effect	effect	NOUN
fuelectenerg-198	57	6	of	of	ADP
fuelectenerg-198	57	7	charge	charge	NOUN
fuelectenerg-198	57	8	trapping	trap	VERB
fuelectenerg-198	57	9	at	at	ADP
fuelectenerg-198	57	10	the	the	DET
fuelectenerg-198	57	11	interface	interface	NOUN
fuelectenerg-198	57	12	between	between	ADP
fuelectenerg-198	57	13	the	the	DET
fuelectenerg-198	57	14	metal	metal	NOUN
fuelectenerg-198	57	15	gate	gate	NOUN
fuelectenerg-198	57	16	and	and	CCONJ
fuelectenerg-198	57	17	the	the	DET
fuelectenerg-198	57	18	high	high	ADJ
fuelectenerg-198	57	19	-	-	PUNCT
fuelectenerg-198	57	20	k	k	NOUN
fuelectenerg-198	57	21	dielectric	dielectric	NOUN
fuelectenerg-198	57	22	for	for	ADP
fuelectenerg-198	57	23	au	au	ADV
fuelectenerg-198	57	24	and	and	CCONJ
fuelectenerg-198	57	25	pt	pt	X
fuelectenerg-198	58	1	[	[	X
fuelectenerg-198	58	2	37]-[39	37]-[39	NUM
fuelectenerg-198	58	3	]	]	PUNCT
fuelectenerg-198	58	4	.	.	PUNCT
fuelectenerg-198	59	1	although	although	SCONJ
fuelectenerg-198	59	2	the	the	DET
fuelectenerg-198	59	3	schottky	schottky	NOUN
fuelectenerg-198	59	4	emission	emission	NOUN
fuelectenerg-198	59	5	from	from	ADP
fuelectenerg-198	59	6	the	the	DET
fuelectenerg-198	59	7	metal	metal	NOUN
fuelectenerg-198	59	8	to	to	ADP
fuelectenerg-198	59	9	the	the	DET
fuelectenerg-198	59	10	high	high	ADJ
fuelectenerg-198	59	11	-	-	PUNCT
fuelectenerg-198	59	12	k	k	NOUN
fuelectenerg-198	59	13	conduction	conduction	NOUN
fuelectenerg-198	59	14	band	band	NOUN
fuelectenerg-198	59	15	is	be	AUX
fuelectenerg-198	59	16	practically	practically	ADV
fuelectenerg-198	59	17	impossible	impossible	ADJ
fuelectenerg-198	59	18	,	,	PUNCT
fuelectenerg-198	59	19	an	an	DET
fuelectenerg-198	59	20	emission	emission	NOUN
fuelectenerg-198	59	21	to	to	ADP
fuelectenerg-198	59	22	the	the	DET
fuelectenerg-198	59	23	traps	trap	NOUN
fuelectenerg-198	59	24	can	can	AUX
fuelectenerg-198	59	25	substantially	substantially	ADV
fuelectenerg-198	59	26	influence	influence	VERB
fuelectenerg-198	59	27	the	the	DET
fuelectenerg-198	59	28	leakage	leakage	NOUN
fuelectenerg-198	59	29	currents	current	NOUN
fuelectenerg-198	59	30	.	.	PUNCT
fuelectenerg-198	60	1	for	for	ADP
fuelectenerg-198	60	2	example	example	NOUN
fuelectenerg-198	60	3	,	,	PUNCT
fuelectenerg-198	60	4	in	in	ADP
fuelectenerg-198	60	5	the	the	DET
fuelectenerg-198	60	6	case	case	NOUN
fuelectenerg-198	60	7	of	of	ADP
fuelectenerg-198	60	8	ta2o5	ta2o5	PROPN
fuelectenerg-198	60	9	and	and	CCONJ
fuelectenerg-198	60	10	a	a	DET
fuelectenerg-198	60	11	pt	pt	NOUN
fuelectenerg-198	60	12	electrode	electrode	NOUN
fuelectenerg-198	60	13	,	,	PUNCT
fuelectenerg-198	60	14	the	the	DET
fuelectenerg-198	60	15	fermi	fermi	NOUN
fuelectenerg-198	60	16	level	level	NOUN
fuelectenerg-198	60	17	in	in	ADP
fuelectenerg-198	60	18	the	the	DET
fuelectenerg-198	60	19	metal	metal	NOUN
fuelectenerg-198	60	20	is	be	AUX
fuelectenerg-198	60	21	about	about	ADV
fuelectenerg-198	60	22	0.6	0.6	NUM
fuelectenerg-198	60	23	ev	ev	INTJ
fuelectenerg-198	60	24	lower	low	ADJ
fuelectenerg-198	60	25	than	than	ADP
fuelectenerg-198	60	26	the	the	DET
fuelectenerg-198	60	27	trapping	trap	VERB
fuelectenerg-198	60	28	level	level	NOUN
fuelectenerg-198	60	29	of	of	ADP
fuelectenerg-198	60	30	the	the	DET
fuelectenerg-198	60	31	d	d	PROPN
fuelectenerg-198	60	32	type	type	NOUN
fuelectenerg-198	60	33	defect	defect	NOUN
fuelectenerg-198	60	34	.	.	PUNCT
fuelectenerg-198	61	1	in	in	ADP
fuelectenerg-198	61	2	that	that	DET
fuelectenerg-198	61	3	case	case	NOUN
fuelectenerg-198	61	4	the	the	DET
fuelectenerg-198	61	5	filling	filling	NOUN
fuelectenerg-198	61	6	of	of	ADP
fuelectenerg-198	61	7	the	the	DET
fuelectenerg-198	61	8	traps	trap	NOUN
fuelectenerg-198	61	9	d	d	PRON
fuelectenerg-198	61	10	type	type	NOUN
fuelectenerg-198	61	11	can	can	AUX
fuelectenerg-198	61	12	occur	occur	VERB
fuelectenerg-198	61	13	by	by	ADP
fuelectenerg-198	61	14	thermal	thermal	ADJ
fuelectenerg-198	61	15	emission	emission	NOUN
fuelectenerg-198	61	16	from	from	ADP
fuelectenerg-198	61	17	the	the	DET
fuelectenerg-198	61	18	metal	metal	NOUN
fuelectenerg-198	61	19	,	,	PUNCT
fuelectenerg-198	61	20	leading	lead	VERB
fuelectenerg-198	61	21	to	to	ADP
fuelectenerg-198	61	22	a	a	DET
fuelectenerg-198	61	23	schottky	schottky	NOUN
fuelectenerg-198	61	24	-	-	PUNCT
fuelectenerg-198	61	25	like	like	ADJ
fuelectenerg-198	61	26	effect	effect	NOUN
fuelectenerg-198	61	27	at	at	ADP
fuelectenerg-198	61	28	low	low	ADJ
fuelectenerg-198	61	29	applied	applied	ADJ
fuelectenerg-198	61	30	voltages	voltage	NOUN
fuelectenerg-198	61	31	,	,	PUNCT
fuelectenerg-198	61	32	as	as	SCONJ
fuelectenerg-198	61	33	it	it	PRON
fuelectenerg-198	61	34	was	be	AUX
fuelectenerg-198	61	35	observed	observe	VERB
fuelectenerg-198	61	36	on	on	ADP
fuelectenerg-198	61	37	au	au	ADJ
fuelectenerg-198	61	38	-	-	PUNCT
fuelectenerg-198	61	39	ta2o5	ta2o5	ADJ
fuelectenerg-198	61	40	-	-	PUNCT
fuelectenerg-198	61	41	pt	pt	NOUN
fuelectenerg-198	61	42	-	-	PUNCT
fuelectenerg-198	61	43	si	si	NOUN
fuelectenerg-198	61	44	structures	structure	NOUN
fuelectenerg-198	61	45	at	at	ADP
fuelectenerg-198	61	46	pt	pt	PROPN
fuelectenerg-198	61	47	electrode	electrode	NOUN
fuelectenerg-198	61	48	negatively	negatively	ADV
fuelectenerg-198	61	49	biased	bias	VERB
fuelectenerg-198	61	50	[	[	X
fuelectenerg-198	61	51	40	40	NUM
fuelectenerg-198	61	52	]	]	PUNCT
fuelectenerg-198	61	53	.	.	PUNCT
fuelectenerg-198	62	1	this	this	DET
fuelectenerg-198	62	2	issue	issue	NOUN
fuelectenerg-198	62	3	requires	require	VERB
fuelectenerg-198	62	4	deeper	deep	ADJ
fuelectenerg-198	62	5	investigation	investigation	NOUN
fuelectenerg-198	62	6	in	in	ADP
fuelectenerg-198	62	7	a	a	DET
fuelectenerg-198	62	8	separate	separate	ADJ
fuelectenerg-198	62	9	study	study	NOUN
fuelectenerg-198	62	10	on	on	ADP
fuelectenerg-198	62	11	metal	metal	NOUN
fuelectenerg-198	62	12	-	-	PUNCT
fuelectenerg-198	62	13	insulator	insulator	NOUN
fuelectenerg-198	62	14	-	-	PUNCT
fuelectenerg-198	62	15	metal	metal	NOUN
fuelectenerg-198	62	16	structures	structure	NOUN
fuelectenerg-198	62	17	.	.	PUNCT
fuelectenerg-198	63	1	one	one	NUM
fuelectenerg-198	63	2	of	of	ADP
fuelectenerg-198	63	3	the	the	DET
fuelectenerg-198	63	4	possible	possible	ADJ
fuelectenerg-198	63	5	approaches	approach	NOUN
fuelectenerg-198	63	6	to	to	ADP
fuelectenerg-198	63	7	this	this	DET
fuelectenerg-198	63	8	problem	problem	NOUN
fuelectenerg-198	63	9	will	will	AUX
fuelectenerg-198	63	10	be	be	AUX
fuelectenerg-198	63	11	to	to	PART
fuelectenerg-198	63	12	use	use	VERB
fuelectenerg-198	63	13	the	the	DET
fuelectenerg-198	63	14	multi	multi	ADJ
fuelectenerg-198	63	15	-	-	ADJ
fuelectenerg-198	63	16	step	step	ADJ
fuelectenerg-198	63	17	trap	trap	NOUN
fuelectenerg-198	63	18	-	-	PUNCT
fuelectenerg-198	63	19	assisted	assist	VERB
fuelectenerg-198	63	20	tunneling	tunneling	NOUN
fuelectenerg-198	63	21	model	model	NOUN
fuelectenerg-198	63	22	,	,	PUNCT
fuelectenerg-198	63	23	as	as	SCONJ
fuelectenerg-198	63	24	it	it	PRON
fuelectenerg-198	63	25	was	be	AUX
fuelectenerg-198	63	26	done	do	VERB
fuelectenerg-198	63	27	in	in	ADP
fuelectenerg-198	63	28	[	[	X
fuelectenerg-198	63	29	41	41	NUM
fuelectenerg-198	63	30	]	]	PUNCT
fuelectenerg-198	63	31	for	for	ADP
fuelectenerg-198	63	32	the	the	DET
fuelectenerg-198	63	33	metal	metal	NOUN
fuelectenerg-198	63	34	-	-	PUNCT
fuelectenerg-198	63	35	al2o3	al2o3	NOUN
fuelectenerg-198	63	36	-	-	PUNCT
fuelectenerg-198	63	37	si	si	PROPN
fuelectenerg-198	63	38	structures	structure	NOUN
fuelectenerg-198	63	39	.	.	PUNCT
fuelectenerg-198	64	1	fig	fig	NOUN
fuelectenerg-198	64	2	.	.	PUNCT
fuelectenerg-198	65	1	2	2	NUM
fuelectenerg-198	65	2	illustration	illustration	NOUN
fuelectenerg-198	65	3	of	of	ADP
fuelectenerg-198	65	4	the	the	DET
fuelectenerg-198	65	5	poole	poole	ADJ
fuelectenerg-198	65	6	-	-	PUNCT
fuelectenerg-198	65	7	frenkel	frenkel	NOUN
fuelectenerg-198	65	8	conduction	conduction	NOUN
fuelectenerg-198	65	9	mechanism	mechanism	NOUN
fuelectenerg-198	65	10			X
fuelectenerg-198	65	11	the	the	DET
fuelectenerg-198	65	12	hoping	hope	VERB
fuelectenerg-198	65	13	conduction	conduction	NOUN
fuelectenerg-198	65	14	in	in	ADP
fuelectenerg-198	65	15	the	the	DET
fuelectenerg-198	65	16	ta2o5	ta2o5	PROPN
fuelectenerg-198	65	17	layer	layer	NOUN
fuelectenerg-198	65	18	is	be	AUX
fuelectenerg-198	65	19	of	of	ADP
fuelectenerg-198	65	20	much	much	ADV
fuelectenerg-198	65	21	lower	low	ADJ
fuelectenerg-198	65	22	importance	importance	NOUN
fuelectenerg-198	65	23	because	because	SCONJ
fuelectenerg-198	65	24	the	the	DET
fuelectenerg-198	65	25	poole	poole	ADJ
fuelectenerg-198	65	26	-	-	PUNCT
fuelectenerg-198	65	27	frenkel	frenkel	NOUN
fuelectenerg-198	65	28	mechanism	mechanism	NOUN
fuelectenerg-198	65	29	gives	give	VERB
fuelectenerg-198	65	30	already	already	ADV
fuelectenerg-198	65	31	much	much	ADV
fuelectenerg-198	65	32	higher	high	ADJ
fuelectenerg-198	65	33	conductivity	conductivity	NOUN
fuelectenerg-198	65	34	in	in	ADP
fuelectenerg-198	65	35	ta2o5	ta2o5	PROPN
fuelectenerg-198	65	36	then	then	ADV
fuelectenerg-198	65	37	the	the	DET
fuelectenerg-198	65	38	hopping	hop	VERB
fuelectenerg-198	65	39	conductivity	conductivity	NOUN
fuelectenerg-198	65	40	in	in	ADP
fuelectenerg-198	65	41	sio2	sio2	PROPN
fuelectenerg-198	65	42	.	.	PUNCT
fuelectenerg-198	66	1	specifically	specifically	ADV
fuelectenerg-198	66	2	,	,	PUNCT
fuelectenerg-198	66	3	when	when	SCONJ
fuelectenerg-198	66	4	ta2o5	ta2o5	PROPN
fuelectenerg-198	66	5	is	be	AUX
fuelectenerg-198	66	6	polycrystalline	polycrystalline	ADJ
fuelectenerg-198	66	7	,	,	PUNCT
fuelectenerg-198	66	8	as	as	SCONJ
fuelectenerg-198	66	9	is	be	AUX
fuelectenerg-198	66	10	the	the	DET
fuelectenerg-198	66	11	case	case	NOUN
fuelectenerg-198	66	12	with	with	ADP
fuelectenerg-198	66	13	the	the	DET
fuelectenerg-198	66	14	films	film	NOUN
fuelectenerg-198	66	15	studied	study	VERB
fuelectenerg-198	66	16	here	here	ADV
fuelectenerg-198	67	1	[	[	X
fuelectenerg-198	67	2	42	42	NUM
fuelectenerg-198	67	3	]	]	PUNCT
fuelectenerg-198	67	4	,	,	PUNCT
fuelectenerg-198	67	5	the	the	DET
fuelectenerg-198	67	6	hopping	hop	VERB
fuelectenerg-198	67	7	conductivity	conductivity	NOUN
fuelectenerg-198	67	8	is	be	AUX
fuelectenerg-198	67	9	very	very	ADV
fuelectenerg-198	67	10	weak	weak	ADJ
fuelectenerg-198	67	11	,	,	PUNCT
fuelectenerg-198	67	12	while	while	SCONJ
fuelectenerg-198	67	13	the	the	DET
fuelectenerg-198	67	14	trap	trap	NOUN
fuelectenerg-198	67	15	density	density	NOUN
fuelectenerg-198	67	16	(	(	PUNCT
fuelectenerg-198	67	17	related	relate	VERB
fuelectenerg-198	67	18	to	to	ADP
fuelectenerg-198	67	19	oxygen	oxygen	NOUN
fuelectenerg-198	67	20	vacancies	vacancy	NOUN
fuelectenerg-198	67	21	,	,	PUNCT
fuelectenerg-198	67	22	grain	grain	NOUN
fuelectenerg-198	67	23	boundaries	boundary	NOUN
fuelectenerg-198	67	24	etc	etc	X
fuelectenerg-198	67	25	.	.	X
fuelectenerg-198	67	26	)	)	PUNCT
fuelectenerg-198	67	27	becomes	become	VERB
fuelectenerg-198	67	28	extremely	extremely	ADV
fuelectenerg-198	67	29	high	high	ADJ
fuelectenerg-198	67	30	.	.	PUNCT
fuelectenerg-198	68	1	therefore	therefore	ADV
fuelectenerg-198	68	2	,	,	PUNCT
fuelectenerg-198	68	3	it	it	PRON
fuelectenerg-198	68	4	is	be	AUX
fuelectenerg-198	68	5	reasonable	reasonable	ADJ
fuelectenerg-198	68	6	to	to	PART
fuelectenerg-198	68	7	neglect	neglect	VERB
fuelectenerg-198	68	8	the	the	DET
fuelectenerg-198	68	9	hopping	hop	VERB
fuelectenerg-198	68	10	conductivity	conductivity	NOUN
fuelectenerg-198	68	11	.	.	PUNCT
fuelectenerg-198	69	1	2.2	2.2	NUM
fuelectenerg-198	69	2	.	.	PUNCT
fuelectenerg-198	69	3	differences	difference	NOUN
fuelectenerg-198	69	4	between	between	ADP
fuelectenerg-198	69	5	the	the	DET
fuelectenerg-198	69	6	cases	case	NOUN
fuelectenerg-198	69	7	of	of	ADP
fuelectenerg-198	69	8	positive	positive	ADJ
fuelectenerg-198	69	9	and	and	CCONJ
fuelectenerg-198	69	10	negative	negative	ADJ
fuelectenerg-198	69	11	gate	gate	NOUN
fuelectenerg-198	69	12	in	in	ADP
fuelectenerg-198	69	13	the	the	DET
fuelectenerg-198	69	14	case	case	NOUN
fuelectenerg-198	69	15	of	of	ADP
fuelectenerg-198	69	16	the	the	DET
fuelectenerg-198	69	17	gate	gate	NOUN
fuelectenerg-198	69	18	positively	positively	ADV
fuelectenerg-198	69	19	biased	bias	VERB
fuelectenerg-198	69	20	,	,	PUNCT
fuelectenerg-198	69	21	the	the	DET
fuelectenerg-198	69	22	electrons	electron	NOUN
fuelectenerg-198	69	23	that	that	PRON
fuelectenerg-198	69	24	tunnel	tunnel	VERB
fuelectenerg-198	69	25	through	through	ADP
fuelectenerg-198	69	26	the	the	DET
fuelectenerg-198	69	27	sio2	sio2	PROPN
fuelectenerg-198	69	28	barrier	barrier	NOUN
fuelectenerg-198	69	29	enter	enter	VERB
fuelectenerg-198	69	30	the	the	DET
fuelectenerg-198	69	31	ta2o5	ta2o5	PROPN
fuelectenerg-198	69	32	conduction	conduction	NOUN
fuelectenerg-198	69	33	band	band	NOUN
fuelectenerg-198	69	34	.	.	PUNCT
fuelectenerg-198	70	1	they	they	PRON
fuelectenerg-198	70	2	drift	drift	VERB
fuelectenerg-198	70	3	for	for	ADP
fuelectenerg-198	70	4	a	a	DET
fuelectenerg-198	70	5	small	small	ADJ
fuelectenerg-198	70	6	distance	distance	NOUN
fuelectenerg-198	70	7	,	,	PUNCT
fuelectenerg-198	70	8	then	then	ADV
fuelectenerg-198	70	9	they	they	PRON
fuelectenerg-198	70	10	become	become	VERB
fuelectenerg-198	70	11	trapped	trapped	ADJ
fuelectenerg-198	70	12	,	,	PUNCT
fuelectenerg-198	70	13	but	but	CCONJ
fuelectenerg-198	70	14	some	some	DET
fuelectenerg-198	70	15	new	new	ADJ
fuelectenerg-198	70	16	electrons	electron	NOUN
fuelectenerg-198	70	17	are	be	AUX
fuelectenerg-198	70	18	subsequently	subsequently	ADV
fuelectenerg-198	70	19	emitted	emit	VERB
fuelectenerg-198	70	20	from	from	ADP
fuelectenerg-198	70	21	the	the	DET
fuelectenerg-198	70	22	traps	trap	NOUN
fuelectenerg-198	70	23	and	and	CCONJ
fuelectenerg-198	70	24	continue	continue	VERB
fuelectenerg-198	70	25	the	the	DET
fuelectenerg-198	70	26	transport	transport	NOUN
fuelectenerg-198	70	27	,	,	PUNCT
fuelectenerg-198	70	28	step	step	NOUN
fuelectenerg-198	70	29	by	by	ADP
fuelectenerg-198	70	30	step	step	NOUN
fuelectenerg-198	70	31	,	,	PUNCT
fuelectenerg-198	70	32	until	until	ADP
fuelectenerg-198	70	33	entering	enter	VERB
fuelectenerg-198	70	34	the	the	DET
fuelectenerg-198	70	35	metal	metal	NOUN
fuelectenerg-198	70	36	(	(	PUNCT
fuelectenerg-198	70	37	fig	fig	NOUN
fuelectenerg-198	70	38	.	.	PUNCT
fuelectenerg-198	71	1	3	3	NUM
fuelectenerg-198	71	2	)	)	PUNCT
fuelectenerg-198	71	3	.	.	PUNCT
fuelectenerg-198	72	1	e	e	X
fuelectenerg-198	72	2	si	si	PROPN
fuelectenerg-198	72	3	high	high	PROPN
fuelectenerg-198	72	4	-	-	PUNCT
fuelectenerg-198	72	5	k	k	NOUN
fuelectenerg-198	72	6	metal	metal	NOUN
fuelectenerg-198	72	7	sio2	sio2	NOUN
fuelectenerg-198	72	8	or	or	CCONJ
fuelectenerg-198	72	9	sioxny	sioxny	VERB
fuelectenerg-198	72	10	physical	physical	ADJ
fuelectenerg-198	72	11	modeling	modeling	NOUN
fuelectenerg-198	72	12	of	of	ADP
fuelectenerg-198	72	13	ta2o5	ta2o5	PROPN
fuelectenerg-198	72	14	based	base	VERB
fuelectenerg-198	72	15	mos	mos	PROPN
fuelectenerg-198	72	16	capacitors	capacitor	NOUN
fuelectenerg-198	72	17	on	on	ADP
fuelectenerg-198	72	18	si	si	PROPN
fuelectenerg-198	72	19	263	263	NUM
fuelectenerg-198	72	20	fig	fig	NOUN
fuelectenerg-198	72	21	.	.	PUNCT
fuelectenerg-198	73	1	3	3	NUM
fuelectenerg-198	73	2	conduction	conduction	NOUN
fuelectenerg-198	73	3	mechanisms	mechanism	NOUN
fuelectenerg-198	73	4	ate	eat	VERB
fuelectenerg-198	73	5	positive	positive	ADJ
fuelectenerg-198	73	6	gate	gate	NOUN
fuelectenerg-198	73	7	in	in	ADP
fuelectenerg-198	73	8	the	the	DET
fuelectenerg-198	73	9	case	case	NOUN
fuelectenerg-198	73	10	of	of	ADP
fuelectenerg-198	73	11	the	the	DET
fuelectenerg-198	73	12	gate	gate	NOUN
fuelectenerg-198	73	13	negatively	negatively	ADV
fuelectenerg-198	73	14	biased	biased	ADJ
fuelectenerg-198	73	15	,	,	PUNCT
fuelectenerg-198	73	16	some	some	DET
fuelectenerg-198	73	17	electrons	electron	NOUN
fuelectenerg-198	73	18	from	from	ADP
fuelectenerg-198	73	19	the	the	DET
fuelectenerg-198	73	20	traps	trap	NOUN
fuelectenerg-198	73	21	near	near	ADP
fuelectenerg-198	73	22	the	the	DET
fuelectenerg-198	73	23	ta2o5	ta2o5	PROPN
fuelectenerg-198	73	24	/	/	SYM
fuelectenerg-198	73	25	sio2	sio2	PROPN
fuelectenerg-198	73	26	interface	interface	NOUN
fuelectenerg-198	73	27	can	can	AUX
fuelectenerg-198	73	28	move	move	VERB
fuelectenerg-198	73	29	to	to	ADP
fuelectenerg-198	73	30	the	the	DET
fuelectenerg-198	73	31	localized	localize	VERB
fuelectenerg-198	73	32	states	state	NOUN
fuelectenerg-198	73	33	in	in	ADP
fuelectenerg-198	73	34	the	the	DET
fuelectenerg-198	73	35	sio2	sio2	PROPN
fuelectenerg-198	73	36	layer	layer	NOUN
fuelectenerg-198	73	37	,	,	PUNCT
fuelectenerg-198	73	38	then	then	ADV
fuelectenerg-198	73	39	by	by	ADP
fuelectenerg-198	73	40	quantum	quantum	ADJ
fuelectenerg-198	73	41	diffusion	diffusion	NOUN
fuelectenerg-198	73	42	to	to	PART
fuelectenerg-198	73	43	contribute	contribute	VERB
fuelectenerg-198	73	44	to	to	ADP
fuelectenerg-198	73	45	the	the	DET
fuelectenerg-198	73	46	hopping	hop	VERB
fuelectenerg-198	73	47	conduction	conduction	NOUN
fuelectenerg-198	73	48	.	.	PUNCT
fuelectenerg-198	74	1	tunneling	tunnel	VERB
fuelectenerg-198	74	2	of	of	ADP
fuelectenerg-198	74	3	electrons	electron	NOUN
fuelectenerg-198	74	4	through	through	ADP
fuelectenerg-198	74	5	the	the	DET
fuelectenerg-198	74	6	sio2	sio2	PROPN
fuelectenerg-198	74	7	layer	layer	NOUN
fuelectenerg-198	74	8	from	from	ADP
fuelectenerg-198	74	9	the	the	DET
fuelectenerg-198	74	10	ta2o5	ta2o5	PROPN
fuelectenerg-198	74	11	layer	layer	NOUN
fuelectenerg-198	74	12	and	and	CCONJ
fuelectenerg-198	74	13	of	of	ADP
fuelectenerg-198	74	14	holes	hole	NOUN
fuelectenerg-198	74	15	from	from	ADP
fuelectenerg-198	74	16	the	the	DET
fuelectenerg-198	74	17	si	si	NOUN
fuelectenerg-198	74	18	substrate	substrate	NOUN
fuelectenerg-198	74	19	could	could	AUX
fuelectenerg-198	74	20	occur	occur	VERB
fuelectenerg-198	74	21	.	.	PUNCT
fuelectenerg-198	75	1	the	the	DET
fuelectenerg-198	75	2	usual	usual	ADJ
fuelectenerg-198	75	3	assumption	assumption	NOUN
fuelectenerg-198	75	4	that	that	SCONJ
fuelectenerg-198	75	5	the	the	DET
fuelectenerg-198	75	6	electron	electron	NOUN
fuelectenerg-198	75	7	current	current	NOUN
fuelectenerg-198	75	8	gives	give	VERB
fuelectenerg-198	75	9	the	the	DET
fuelectenerg-198	75	10	dominant	dominant	ADJ
fuelectenerg-198	75	11	contribution	contribution	NOUN
fuelectenerg-198	75	12	in	in	ADP
fuelectenerg-198	75	13	this	this	DET
fuelectenerg-198	75	14	case	case	NOUN
fuelectenerg-198	75	15	is	be	AUX
fuelectenerg-198	75	16	not	not	PART
fuelectenerg-198	75	17	valid	valid	ADJ
fuelectenerg-198	75	18	,	,	PUNCT
fuelectenerg-198	75	19	because	because	SCONJ
fuelectenerg-198	75	20	the	the	DET
fuelectenerg-198	75	21	fowlernordheim	fowlernordheim	NOUN
fuelectenerg-198	75	22	and	and	CCONJ
fuelectenerg-198	75	23	direct	direct	ADJ
fuelectenerg-198	75	24	tunneling	tunneling	NOUN
fuelectenerg-198	75	25	are	be	AUX
fuelectenerg-198	75	26	possible	possible	ADJ
fuelectenerg-198	75	27	where	where	SCONJ
fuelectenerg-198	75	28	an	an	DET
fuelectenerg-198	75	29	electron	electron	NOUN
fuelectenerg-198	75	30	gas	gas	NOUN
fuelectenerg-198	75	31	from	from	ADP
fuelectenerg-198	75	32	the	the	DET
fuelectenerg-198	75	33	metal	metal	NOUN
fuelectenerg-198	75	34	of	of	ADP
fuelectenerg-198	75	35	semiconductor	semiconductor	NOUN
fuelectenerg-198	75	36	is	be	AUX
fuelectenerg-198	75	37	in	in	ADP
fuelectenerg-198	75	38	contact	contact	NOUN
fuelectenerg-198	75	39	with	with	ADP
fuelectenerg-198	75	40	an	an	DET
fuelectenerg-198	75	41	sio2	sio2	PROPN
fuelectenerg-198	75	42	surface	surface	NOUN
fuelectenerg-198	76	1	[	[	X
fuelectenerg-198	76	2	43	43	NUM
fuelectenerg-198	76	3	]	]	PUNCT
fuelectenerg-198	76	4	.	.	PUNCT
fuelectenerg-198	77	1	there	there	ADV
fuelectenerg-198	77	2	,	,	PUNCT
fuelectenerg-198	77	3	the	the	DET
fuelectenerg-198	77	4	dominant	dominant	ADJ
fuelectenerg-198	77	5	part	part	NOUN
fuelectenerg-198	77	6	of	of	ADP
fuelectenerg-198	77	7	the	the	DET
fuelectenerg-198	77	8	electrons	electron	NOUN
fuelectenerg-198	77	9	moving	move	VERB
fuelectenerg-198	77	10	towards	towards	ADP
fuelectenerg-198	77	11	this	this	DET
fuelectenerg-198	77	12	surface	surface	NOUN
fuelectenerg-198	77	13	are	be	AUX
fuelectenerg-198	77	14	reflected	reflect	VERB
fuelectenerg-198	77	15	,	,	PUNCT
fuelectenerg-198	77	16	while	while	SCONJ
fuelectenerg-198	77	17	a	a	DET
fuelectenerg-198	77	18	small	small	ADJ
fuelectenerg-198	77	19	part	part	NOUN
fuelectenerg-198	77	20	tunnels	tunnel	NOUN
fuelectenerg-198	77	21	through	through	ADP
fuelectenerg-198	77	22	the	the	DET
fuelectenerg-198	77	23	sio2	sio2	PROPN
fuelectenerg-198	77	24	layer	layer	NOUN
fuelectenerg-198	77	25	entering	enter	VERB
fuelectenerg-198	77	26	the	the	DET
fuelectenerg-198	77	27	opposite	opposite	ADJ
fuelectenerg-198	77	28	electrode	electrode	NOUN
fuelectenerg-198	77	29	(	(	PUNCT
fuelectenerg-198	77	30	direct	direct	ADJ
fuelectenerg-198	77	31	tunneling	tunneling	NOUN
fuelectenerg-198	77	32	)	)	PUNCT
fuelectenerg-198	77	33	or	or	CCONJ
fuelectenerg-198	77	34	a	a	DET
fuelectenerg-198	77	35	part	part	NOUN
fuelectenerg-198	77	36	of	of	ADP
fuelectenerg-198	77	37	it	it	PRON
fuelectenerg-198	77	38	entering	enter	VERB
fuelectenerg-198	77	39	its	its	PRON
fuelectenerg-198	77	40	conduction	conduction	NOUN
fuelectenerg-198	77	41	zone	zone	NOUN
fuelectenerg-198	77	42	(	(	PUNCT
fuelectenerg-198	77	43	fowler	fowler	NOUN
fuelectenerg-198	77	44	-	-	PUNCT
fuelectenerg-198	77	45	nordheim	nordheim	PROPN
fuelectenerg-198	77	46	tunneling	tunneling	NOUN
fuelectenerg-198	77	47	)	)	PUNCT
fuelectenerg-198	77	48	.	.	PUNCT
fuelectenerg-198	78	1	in	in	ADP
fuelectenerg-198	78	2	the	the	DET
fuelectenerg-198	78	3	case	case	NOUN
fuelectenerg-198	78	4	of	of	ADP
fuelectenerg-198	78	5	an	an	DET
fuelectenerg-198	78	6	insulator	insulator	NOUN
fuelectenerg-198	78	7	,	,	PUNCT
fuelectenerg-198	78	8	the	the	DET
fuelectenerg-198	78	9	density	density	NOUN
fuelectenerg-198	78	10	of	of	ADP
fuelectenerg-198	78	11	the	the	DET
fuelectenerg-198	78	12	electrons	electron	NOUN
fuelectenerg-198	78	13	in	in	ADP
fuelectenerg-198	78	14	the	the	DET
fuelectenerg-198	78	15	conduction	conduction	NOUN
fuelectenerg-198	78	16	zone	zone	NOUN
fuelectenerg-198	78	17	is	be	AUX
fuelectenerg-198	78	18	practically	practically	ADV
fuelectenerg-198	78	19	zero	zero	NUM
fuelectenerg-198	78	20	and	and	CCONJ
fuelectenerg-198	78	21	the	the	DET
fuelectenerg-198	78	22	electron	electron	NOUN
fuelectenerg-198	78	23	tunneling	tunneling	NOUN
fuelectenerg-198	78	24	is	be	AUX
fuelectenerg-198	78	25	practically	practically	ADV
fuelectenerg-198	78	26	impossible	impossible	ADJ
fuelectenerg-198	78	27	.	.	PUNCT
fuelectenerg-198	79	1	therefore	therefore	ADV
fuelectenerg-198	79	2	only	only	ADV
fuelectenerg-198	79	3	the	the	DET
fuelectenerg-198	79	4	holes	hole	NOUN
fuelectenerg-198	79	5	from	from	ADP
fuelectenerg-198	79	6	the	the	DET
fuelectenerg-198	79	7	substrate	substrate	NOUN
fuelectenerg-198	79	8	contribute	contribute	NOUN
fuelectenerg-198	79	9	to	to	ADP
fuelectenerg-198	79	10	the	the	DET
fuelectenerg-198	79	11	tunneling	tunneling	NOUN
fuelectenerg-198	79	12	current	current	NOUN
fuelectenerg-198	79	13	[	[	X
fuelectenerg-198	79	14	44	44	NUM
fuelectenerg-198	79	15	]	]	PUNCT
fuelectenerg-198	79	16	.	.	PUNCT
fuelectenerg-198	80	1	for	for	ADP
fuelectenerg-198	80	2	enough	enough	ADJ
fuelectenerg-198	80	3	high	high	ADJ
fuelectenerg-198	80	4	fields	field	NOUN
fuelectenerg-198	80	5	,	,	PUNCT
fuelectenerg-198	80	6	the	the	DET
fuelectenerg-198	80	7	holes	hole	NOUN
fuelectenerg-198	80	8	injected	inject	VERB
fuelectenerg-198	80	9	from	from	ADP
fuelectenerg-198	80	10	the	the	DET
fuelectenerg-198	80	11	si	si	NOUN
fuelectenerg-198	80	12	substrate	substrate	NOUN
fuelectenerg-198	80	13	enter	enter	VERB
fuelectenerg-198	80	14	the	the	DET
fuelectenerg-198	80	15	valence	valence	NOUN
fuelectenerg-198	80	16	band	band	NOUN
fuelectenerg-198	80	17	of	of	ADP
fuelectenerg-198	80	18	the	the	DET
fuelectenerg-198	80	19	ta2o5	ta2o5	PROPN
fuelectenerg-198	80	20	layer	layer	NOUN
fuelectenerg-198	80	21	.	.	PUNCT
fuelectenerg-198	81	1	because	because	SCONJ
fuelectenerg-198	81	2	of	of	ADP
fuelectenerg-198	81	3	the	the	DET
fuelectenerg-198	81	4	high	high	ADJ
fuelectenerg-198	81	5	trap	trap	NOUN
fuelectenerg-198	81	6	density	density	NOUN
fuelectenerg-198	81	7	,	,	PUNCT
fuelectenerg-198	81	8	after	after	ADP
fuelectenerg-198	81	9	passing	pass	VERB
fuelectenerg-198	81	10	a	a	DET
fuelectenerg-198	81	11	small	small	ADJ
fuelectenerg-198	81	12	distance	distance	NOUN
fuelectenerg-198	81	13	,	,	PUNCT
fuelectenerg-198	81	14	they	they	PRON
fuelectenerg-198	81	15	recombine	recombine	VERB
fuelectenerg-198	81	16	with	with	ADP
fuelectenerg-198	81	17	the	the	DET
fuelectenerg-198	81	18	electrons	electron	NOUN
fuelectenerg-198	81	19	on	on	ADP
fuelectenerg-198	81	20	the	the	DET
fuelectenerg-198	81	21	traps	trap	NOUN
fuelectenerg-198	81	22	.	.	PUNCT
fuelectenerg-198	82	1	special	special	ADJ
fuelectenerg-198	82	2	attention	attention	NOUN
fuelectenerg-198	82	3	has	have	VERB
fuelectenerg-198	82	4	to	to	PART
fuelectenerg-198	82	5	be	be	AUX
fuelectenerg-198	82	6	devoted	devote	VERB
fuelectenerg-198	82	7	to	to	ADP
fuelectenerg-198	82	8	the	the	DET
fuelectenerg-198	82	9	case	case	NOUN
fuelectenerg-198	82	10	of	of	ADP
fuelectenerg-198	82	11	lower	low	ADJ
fuelectenerg-198	82	12	fields	field	NOUN
fuelectenerg-198	82	13	,	,	PUNCT
fuelectenerg-198	82	14	where	where	SCONJ
fuelectenerg-198	82	15	the	the	DET
fuelectenerg-198	82	16	holes	hole	NOUN
fuelectenerg-198	82	17	can	can	AUX
fuelectenerg-198	82	18	not	not	PART
fuelectenerg-198	82	19	tunnel	tunnel	VERB
fuelectenerg-198	82	20	to	to	ADP
fuelectenerg-198	82	21	the	the	DET
fuelectenerg-198	82	22	valence	valence	NOUN
fuelectenerg-198	82	23	band	band	NOUN
fuelectenerg-198	82	24	(	(	PUNCT
fuelectenerg-198	82	25	fig	fig	NOUN
fuelectenerg-198	82	26	.	.	PUNCT
fuelectenerg-198	82	27	4	4	NUM
fuelectenerg-198	82	28	)	)	PUNCT
fuelectenerg-198	82	29	.	.	PUNCT
fuelectenerg-198	83	1	by	by	ADP
fuelectenerg-198	83	2	other	other	ADJ
fuelectenerg-198	83	3	authors	author	NOUN
fuelectenerg-198	83	4	[	[	X
fuelectenerg-198	83	5	45	45	NUM
fuelectenerg-198	83	6	]	]	PUNCT
fuelectenerg-198	83	7	an	an	DET
fuelectenerg-198	83	8	attempt	attempt	NOUN
fuelectenerg-198	83	9	was	be	AUX
fuelectenerg-198	83	10	made	make	VERB
fuelectenerg-198	83	11	to	to	PART
fuelectenerg-198	83	12	describe	describe	VERB
fuelectenerg-198	83	13	a	a	DET
fuelectenerg-198	83	14	similar	similar	ADJ
fuelectenerg-198	83	15	situation	situation	NOUN
fuelectenerg-198	83	16	by	by	ADP
fuelectenerg-198	83	17	the	the	DET
fuelectenerg-198	83	18	double	double	ADJ
fuelectenerg-198	83	19	barrier	barrier	NOUN
fuelectenerg-198	83	20	tunneling	tunneling	NOUN
fuelectenerg-198	83	21	.	.	PUNCT
fuelectenerg-198	84	1	fig	fig	NOUN
fuelectenerg-198	84	2	.	.	PUNCT
fuelectenerg-198	85	1	4	4	NUM
fuelectenerg-198	85	2	conduction	conduction	NOUN
fuelectenerg-198	85	3	mechanisms	mechanism	NOUN
fuelectenerg-198	85	4	ate	eat	VERB
fuelectenerg-198	85	5	negative	negative	ADJ
fuelectenerg-198	85	6	gate	gate	NOUN
fuelectenerg-198	85	7	e(-	e(-	NOUN
fuelectenerg-198	85	8	)	)	PUNCT
fuelectenerg-198	85	9	e(-	e(-	NOUN
fuelectenerg-198	85	10	)	)	PUNCT
fuelectenerg-198	85	11	poole	poole	ADJ
fuelectenerg-198	85	12	-	-	PUNCT
fuelectenerg-198	85	13	frenkel	frenkel	NOUN
fuelectenerg-198	85	14	transport	transport	NOUN
fuelectenerg-198	85	15	of	of	ADP
fuelectenerg-198	85	16	electrons	electron	NOUN
fuelectenerg-198	85	17	trapping	trap	VERB
fuelectenerg-198	85	18	of	of	ADP
fuelectenerg-198	85	19	the	the	DET
fuelectenerg-198	85	20	electrons	electron	NOUN
fuelectenerg-198	85	21	injected	inject	VERB
fuelectenerg-198	85	22	through	through	ADP
fuelectenerg-198	85	23	sio2	sio2	PROPN
fuelectenerg-198	85	24	into	into	ADP
fuelectenerg-198	85	25	the	the	DET
fuelectenerg-198	85	26	high	high	ADJ
fuelectenerg-198	85	27	-	-	PUNCT
fuelectenerg-198	85	28	k	k	NOUN
fuelectenerg-198	85	29	conduction	conduction	NOUN
fuelectenerg-198	85	30	band	band	NOUN
fuelectenerg-198	85	31	tunneling	tunneling	NOUN
fuelectenerg-198	85	32	of	of	ADP
fuelectenerg-198	85	33	electrons	electron	NOUN
fuelectenerg-198	85	34	high	high	ADJ
fuelectenerg-198	85	35	-	-	PUNCT
fuelectenerg-198	85	36	k	k	NOUN
fuelectenerg-198	85	37	metal	metal	NOUN
fuelectenerg-198	85	38	si	si	NOUN
fuelectenerg-198	85	39	e(-	e(-	PROPN
fuelectenerg-198	85	40	)	)	PUNCT
fuelectenerg-198	85	41	si	si	ADP
fuelectenerg-198	85	42	high	high	ADJ
fuelectenerg-198	85	43	-	-	PUNCT
fuelectenerg-198	85	44	k	k	NOUN
fuelectenerg-198	85	45	metal	metal	NOUN
fuelectenerg-198	85	46	tunneling	tunneling	NOUN
fuelectenerg-198	85	47	of	of	ADP
fuelectenerg-198	85	48	holes	hole	NOUN
fuelectenerg-198	85	49	poole	poole	ADJ
fuelectenerg-198	85	50	-	-	PUNCT
fuelectenerg-198	85	51	frenkel	frenkel	NOUN
fuelectenerg-198	85	52	transport	transport	NOUN
fuelectenerg-198	85	53	of	of	ADP
fuelectenerg-198	85	54	electrons	electron	NOUN
fuelectenerg-198	85	55	h(+	h(+	NOUN
fuelectenerg-198	85	56	)	)	PUNCT
fuelectenerg-198	85	57	recombination	recombination	NOUN
fuelectenerg-198	85	58	of	of	ADP
fuelectenerg-198	85	59	the	the	DET
fuelectenerg-198	85	60	electrons	electron	NOUN
fuelectenerg-198	85	61	from	from	ADP
fuelectenerg-198	85	62	the	the	DET
fuelectenerg-198	85	63	high	high	ADJ
fuelectenerg-198	85	64	-	-	PUNCT
fuelectenerg-198	85	65	k	k	NOUN
fuelectenerg-198	85	66	traps	trap	NOUN
fuelectenerg-198	85	67	with	with	ADP
fuelectenerg-198	85	68	the	the	DET
fuelectenerg-198	85	69	holes	hole	NOUN
fuelectenerg-198	85	70	injected	inject	VERB
fuelectenerg-198	85	71	through	through	ADP
fuelectenerg-198	85	72	sio2	sio2	NOUN
fuelectenerg-198	85	73	trapping	trap	VERB
fuelectenerg-198	85	74	of	of	ADP
fuelectenerg-198	85	75	holes	hole	NOUN
fuelectenerg-198	85	76	sio2	sio2	NOUN
fuelectenerg-198	85	77	or	or	CCONJ
fuelectenerg-198	85	78	sioxny	sioxny	PROPN
fuelectenerg-198	85	79	sio2	sio2	PROPN
fuelectenerg-198	85	80	or	or	CCONJ
fuelectenerg-198	85	81	sioxny	sioxny	PROPN
fuelectenerg-198	85	82	264	264	NUM
fuelectenerg-198	85	83	n.	n.	NOUN
fuelectenerg-198	85	84	novkovski	novkovski	NOUN
fuelectenerg-198	85	85	our	our	PRON
fuelectenerg-198	85	86	estimations	estimation	NOUN
fuelectenerg-198	85	87	in	in	ADP
fuelectenerg-198	85	88	connection	connection	NOUN
fuelectenerg-198	85	89	with	with	ADP
fuelectenerg-198	85	90	the	the	DET
fuelectenerg-198	85	91	proposed	propose	VERB
fuelectenerg-198	85	92	comprehensive	comprehensive	ADJ
fuelectenerg-198	85	93	model	model	NOUN
fuelectenerg-198	85	94	showed	show	VERB
fuelectenerg-198	85	95	feeble	feeble	ADJ
fuelectenerg-198	85	96	agreement	agreement	NOUN
fuelectenerg-198	85	97	with	with	ADP
fuelectenerg-198	85	98	the	the	DET
fuelectenerg-198	85	99	experimental	experimental	ADJ
fuelectenerg-198	85	100	results	result	NOUN
fuelectenerg-198	85	101	if	if	SCONJ
fuelectenerg-198	85	102	a	a	DET
fuelectenerg-198	85	103	double	double	ADJ
fuelectenerg-198	85	104	barrier	barrier	NOUN
fuelectenerg-198	85	105	tunneling	tunneling	NOUN
fuelectenerg-198	85	106	mechanism	mechanism	NOUN
fuelectenerg-198	85	107	is	be	AUX
fuelectenerg-198	85	108	invoked	invoke	VERB
fuelectenerg-198	85	109	.	.	PUNCT
fuelectenerg-198	86	1	the	the	DET
fuelectenerg-198	86	2	reason	reason	NOUN
fuelectenerg-198	86	3	is	be	AUX
fuelectenerg-198	86	4	that	that	SCONJ
fuelectenerg-198	86	5	the	the	DET
fuelectenerg-198	86	6	dominant	dominant	ADJ
fuelectenerg-198	86	7	conduction	conduction	NOUN
fuelectenerg-198	86	8	mechanism	mechanism	NOUN
fuelectenerg-198	86	9	for	for	ADP
fuelectenerg-198	86	10	the	the	DET
fuelectenerg-198	86	11	ta2o5	ta2o5	PROPN
fuelectenerg-198	86	12	layer	layer	NOUN
fuelectenerg-198	86	13	is	be	AUX
fuelectenerg-198	86	14	the	the	DET
fuelectenerg-198	86	15	poole	poole	ADJ
fuelectenerg-198	86	16	-	-	PUNCT
fuelectenerg-198	86	17	frenkel	frenkel	NOUN
fuelectenerg-198	86	18	and	and	CCONJ
fuelectenerg-198	86	19	not	not	PART
fuelectenerg-198	86	20	the	the	DET
fuelectenerg-198	86	21	tunneling	tunneling	NOUN
fuelectenerg-198	86	22	.	.	PUNCT
fuelectenerg-198	87	1	once	once	SCONJ
fuelectenerg-198	87	2	the	the	DET
fuelectenerg-198	87	3	charge	charge	NOUN
fuelectenerg-198	87	4	carriers	carrier	NOUN
fuelectenerg-198	87	5	enter	enter	VERB
fuelectenerg-198	87	6	the	the	DET
fuelectenerg-198	87	7	forbidden	forbid	VERB
fuelectenerg-198	87	8	gap	gap	NOUN
fuelectenerg-198	87	9	of	of	ADP
fuelectenerg-198	87	10	the	the	DET
fuelectenerg-198	87	11	tantalum	tantalum	NOUN
fuelectenerg-198	87	12	pentoxide	pentoxide	NOUN
fuelectenerg-198	87	13	,	,	PUNCT
fuelectenerg-198	87	14	they	they	PRON
fuelectenerg-198	87	15	become	become	VERB
fuelectenerg-198	87	16	trapped	trapped	ADJ
fuelectenerg-198	87	17	after	after	ADP
fuelectenerg-198	87	18	a	a	DET
fuelectenerg-198	87	19	short	short	ADJ
fuelectenerg-198	87	20	distance	distance	NOUN
fuelectenerg-198	87	21	,	,	PUNCT
fuelectenerg-198	87	22	because	because	SCONJ
fuelectenerg-198	87	23	the	the	DET
fuelectenerg-198	87	24	defect	defect	NOUN
fuelectenerg-198	87	25	related	relate	VERB
fuelectenerg-198	87	26	trap	trap	NOUN
fuelectenerg-198	87	27	density	density	NOUN
fuelectenerg-198	87	28	there	there	PRON
fuelectenerg-198	87	29	is	be	VERB
fuelectenerg-198	87	30	extremely	extremely	ADV
fuelectenerg-198	87	31	high	high	ADJ
fuelectenerg-198	87	32	.	.	PUNCT
fuelectenerg-198	88	1	tunneling	tunneling	NOUN
fuelectenerg-198	88	2	is	be	AUX
fuelectenerg-198	88	3	typical	typical	ADJ
fuelectenerg-198	88	4	of	of	ADP
fuelectenerg-198	88	5	the	the	DET
fuelectenerg-198	88	6	sio2	sio2	PROPN
fuelectenerg-198	88	7	films	film	NOUN
fuelectenerg-198	88	8	and	and	CCONJ
fuelectenerg-198	88	9	is	be	AUX
fuelectenerg-198	88	10	observed	observe	VERB
fuelectenerg-198	88	11	in	in	ADP
fuelectenerg-198	88	12	si3n4	si3n4	PROPN
fuelectenerg-198	88	13	films	film	NOUN
fuelectenerg-198	88	14	with	with	ADP
fuelectenerg-198	88	15	very	very	ADV
fuelectenerg-198	88	16	high	high	ADJ
fuelectenerg-198	88	17	quality	quality	NOUN
fuelectenerg-198	88	18	,	,	PUNCT
fuelectenerg-198	88	19	where	where	SCONJ
fuelectenerg-198	88	20	the	the	DET
fuelectenerg-198	88	21	defect	defect	NOUN
fuelectenerg-198	88	22	density	density	NOUN
fuelectenerg-198	88	23	is	be	AUX
fuelectenerg-198	88	24	low	low	ADJ
fuelectenerg-198	88	25	and	and	CCONJ
fuelectenerg-198	88	26	the	the	DET
fuelectenerg-198	88	27	injected	inject	VERB
fuelectenerg-198	88	28	charge	charge	NOUN
fuelectenerg-198	88	29	carriers	carrier	NOUN
fuelectenerg-198	88	30	can	can	AUX
fuelectenerg-198	88	31	pass	pass	VERB
fuelectenerg-198	88	32	long	long	ADJ
fuelectenerg-198	88	33	distances	distance	NOUN
fuelectenerg-198	88	34	(	(	PUNCT
fuelectenerg-198	88	35	of	of	ADP
fuelectenerg-198	88	36	order	order	NOUN
fuelectenerg-198	88	37	of	of	ADP
fuelectenerg-198	88	38	100	100	NUM
fuelectenerg-198	88	39	nm	nm	NOUN
fuelectenerg-198	88	40	)	)	PUNCT
fuelectenerg-198	88	41	with	with	ADP
fuelectenerg-198	88	42	a	a	DET
fuelectenerg-198	88	43	small	small	ADJ
fuelectenerg-198	88	44	probability	probability	NOUN
fuelectenerg-198	88	45	to	to	PART
fuelectenerg-198	88	46	be	be	AUX
fuelectenerg-198	88	47	trapped	trap	VERB
fuelectenerg-198	88	48	.	.	PUNCT
fuelectenerg-198	89	1	in	in	ADP
fuelectenerg-198	89	2	some	some	DET
fuelectenerg-198	89	3	cases	case	NOUN
fuelectenerg-198	89	4	(	(	PUNCT
fuelectenerg-198	89	5	sio2	sio2	NOUN
fuelectenerg-198	89	6	thinner	thin	ADJ
fuelectenerg-198	89	7	than	than	ADP
fuelectenerg-198	89	8	4	4	NUM
fuelectenerg-198	89	9	nm	nm	NOUN
fuelectenerg-198	89	10	)	)	PUNCT
fuelectenerg-198	89	11	even	even	ADV
fuelectenerg-198	89	12	a	a	DET
fuelectenerg-198	89	13	ballistic	ballistic	ADJ
fuelectenerg-198	89	14	transport	transport	NOUN
fuelectenerg-198	89	15	is	be	AUX
fuelectenerg-198	89	16	observed	observe	VERB
fuelectenerg-198	89	17	[	[	X
fuelectenerg-198	89	18	46	46	NUM
fuelectenerg-198	89	19	]	]	PUNCT
fuelectenerg-198	89	20	.	.	PUNCT
fuelectenerg-198	90	1	the	the	DET
fuelectenerg-198	90	2	most	most	ADV
fuelectenerg-198	90	3	probable	probable	ADJ
fuelectenerg-198	90	4	route	route	NOUN
fuelectenerg-198	90	5	of	of	ADP
fuelectenerg-198	90	6	the	the	DET
fuelectenerg-198	90	7	electrons	electron	NOUN
fuelectenerg-198	90	8	injected	inject	VERB
fuelectenerg-198	90	9	into	into	ADP
fuelectenerg-198	90	10	the	the	DET
fuelectenerg-198	90	11	ta2o5	ta2o5	PROPN
fuelectenerg-198	90	12	forbidden	forbid	VERB
fuelectenerg-198	90	13	gap	gap	NOUN
fuelectenerg-198	90	14	is	be	AUX
fuelectenerg-198	90	15	to	to	PART
fuelectenerg-198	90	16	be	be	AUX
fuelectenerg-198	90	17	first	first	ADV
fuelectenerg-198	90	18	trapped	trap	VERB
fuelectenerg-198	90	19	near	near	ADP
fuelectenerg-198	90	20	the	the	DET
fuelectenerg-198	90	21	ta2o5	ta2o5	PROPN
fuelectenerg-198	90	22	/	/	SYM
fuelectenerg-198	90	23	sioxny	sioxny	PROPN
fuelectenerg-198	90	24	interface	interface	NOUN
fuelectenerg-198	90	25	and	and	CCONJ
fuelectenerg-198	90	26	then	then	ADV
fuelectenerg-198	90	27	to	to	PART
fuelectenerg-198	90	28	recombine	recombine	VERB
fuelectenerg-198	90	29	with	with	ADP
fuelectenerg-198	90	30	electrons	electron	NOUN
fuelectenerg-198	90	31	from	from	ADP
fuelectenerg-198	90	32	other	other	ADJ
fuelectenerg-198	90	33	traps	trap	NOUN
fuelectenerg-198	90	34	or	or	CCONJ
fuelectenerg-198	90	35	from	from	ADP
fuelectenerg-198	90	36	the	the	DET
fuelectenerg-198	90	37	conduction	conduction	NOUN
fuelectenerg-198	90	38	band	band	NOUN
fuelectenerg-198	90	39	(	(	PUNCT
fuelectenerg-198	90	40	fig	fig	NOUN
fuelectenerg-198	90	41	.	.	PUNCT
fuelectenerg-198	91	1	4	4	NUM
fuelectenerg-198	91	2	)	)	PUNCT
fuelectenerg-198	91	3	.	.	PUNCT
fuelectenerg-198	92	1	a	a	DET
fuelectenerg-198	92	2	similar	similar	ADJ
fuelectenerg-198	92	3	situation	situation	NOUN
fuelectenerg-198	92	4	can	can	AUX
fuelectenerg-198	92	5	also	also	ADV
fuelectenerg-198	92	6	appear	appear	VERB
fuelectenerg-198	92	7	in	in	ADP
fuelectenerg-198	92	8	the	the	DET
fuelectenerg-198	92	9	case	case	NOUN
fuelectenerg-198	92	10	of	of	ADP
fuelectenerg-198	92	11	low	low	ADJ
fuelectenerg-198	92	12	fields	field	NOUN
fuelectenerg-198	92	13	for	for	ADP
fuelectenerg-198	92	14	the	the	DET
fuelectenerg-198	92	15	opposite	opposite	ADJ
fuelectenerg-198	92	16	gate	gate	NOUN
fuelectenerg-198	92	17	polarity	polarity	NOUN
fuelectenerg-198	92	18	.	.	PUNCT
fuelectenerg-198	93	1	2.3	2.3	NUM
fuelectenerg-198	93	2	.	.	PUNCT
fuelectenerg-198	94	1	construction	construction	NOUN
fuelectenerg-198	94	2	of	of	ADP
fuelectenerg-198	94	3	the	the	DET
fuelectenerg-198	94	4	model	model	NOUN
fuelectenerg-198	94	5	the	the	DET
fuelectenerg-198	94	6	expressions	expression	NOUN
fuelectenerg-198	94	7	for	for	ADP
fuelectenerg-198	94	8	the	the	DET
fuelectenerg-198	94	9	current	current	ADJ
fuelectenerg-198	94	10	density	density	NOUN
fuelectenerg-198	94	11	due	due	ADP
fuelectenerg-198	94	12	to	to	ADP
fuelectenerg-198	94	13	the	the	DET
fuelectenerg-198	94	14	hopping	hop	VERB
fuelectenerg-198	94	15	conductivity	conductivity	NOUN
fuelectenerg-198	94	16	in	in	ADP
fuelectenerg-198	94	17	sio2	sio2	PROPN
fuelectenerg-198	94	18	(	(	PUNCT
fuelectenerg-198	94	19	jhc	jhc	PROPN
fuelectenerg-198	94	20	)	)	PUNCT
fuelectenerg-198	94	21	is	be	AUX
fuelectenerg-198	94	22	described	describe	VERB
fuelectenerg-198	94	23	by	by	ADP
fuelectenerg-198	94	24	the	the	DET
fuelectenerg-198	94	25	following	follow	VERB
fuelectenerg-198	94	26	expression	expression	NOUN
fuelectenerg-198	94	27	:	:	PUNCT
fuelectenerg-198	94	28	ififhc	ififhc	NOUN
fuelectenerg-198	94	29	ej	ej	PROPN
fuelectenerg-198	94	30			NOUN
fuelectenerg-198	94	31	(	(	PUNCT
fuelectenerg-198	94	32	1	1	NUM
fuelectenerg-198	94	33	)	)	PUNCT
fuelectenerg-198	94	34	where	where	SCONJ
fuelectenerg-198	94	35	if	if	PROPN
fuelectenerg-198	94	36	is	be	AUX
fuelectenerg-198	94	37	the	the	DET
fuelectenerg-198	94	38	temperature	temperature	NOUN
fuelectenerg-198	94	39	dependant	dependant	ADJ
fuelectenerg-198	94	40	hopping	hopping	NOUN
fuelectenerg-198	94	41	conductivity	conductivity	NOUN
fuelectenerg-198	94	42	and	and	CCONJ
fuelectenerg-198	94	43	eif	eif	NOUN
fuelectenerg-198	94	44	is	be	AUX
fuelectenerg-198	94	45	the	the	DET
fuelectenerg-198	94	46	filed	file	VERB
fuelectenerg-198	94	47	in	in	ADP
fuelectenerg-198	94	48	the	the	DET
fuelectenerg-198	94	49	interfacial	interfacial	ADJ
fuelectenerg-198	94	50	layer	layer	NOUN
fuelectenerg-198	94	51	.	.	PUNCT
fuelectenerg-198	95	1	direct	direct	ADJ
fuelectenerg-198	95	2	tunneling	tunnel	VERB
fuelectenerg-198	95	3	current	current	ADJ
fuelectenerg-198	95	4	density	density	NOUN
fuelectenerg-198	95	5	through	through	ADP
fuelectenerg-198	95	6	the	the	DET
fuelectenerg-198	95	7	interfacial	interfacial	ADJ
fuelectenerg-198	95	8	layer	layer	NOUN
fuelectenerg-198	95	9	(	(	PUNCT
fuelectenerg-198	95	10	jtd	jtd	PROPN
fuelectenerg-198	95	11	)	)	PUNCT
fuelectenerg-198	95	12	is	be	AUX
fuelectenerg-198	95	13	given	give	VERB
fuelectenerg-198	95	14	by	by	ADP
fuelectenerg-198	95	15	the	the	DET
fuelectenerg-198	95	16	following	follow	VERB
fuelectenerg-198	95	17	expression	expression	NOUN
fuelectenerg-198	95	18	:	:	PUNCT
fuelectenerg-198	95	19			PROPN
fuelectenerg-198	95	20			PROPN
fuelectenerg-198	95	21			PROPN
fuelectenerg-198	95	22			NOUN
fuelectenerg-198	96	1			PROPN
fuelectenerg-198	96	2			PROPN
fuelectenerg-198	97	1			PROPN
fuelectenerg-198	97	2			PROPN
fuelectenerg-198	98	1			PROPN
fuelectenerg-198	98	2			NOUN
fuelectenerg-198	98	3			PROPN
fuelectenerg-198	99	1			PROPN
fuelectenerg-198	100	1			PROPN
fuelectenerg-198	100	2			NOUN
fuelectenerg-198	101	1			PROPN
fuelectenerg-198	102	1			PROPN
fuelectenerg-198	103	1			PROPN
fuelectenerg-198	103	2			PROPN
fuelectenerg-198	104	1			PROPN
fuelectenerg-198	104	2			NOUN
fuelectenerg-198	104	3			NOUN
fuelectenerg-198	104	4			NOUN
fuelectenerg-198	104	5			PROPN
fuelectenerg-198	104	6			PROPN
fuelectenerg-198	104	7			PROPN
fuelectenerg-198	104	8			NOUN
fuelectenerg-198	104	9			NUM
fuelectenerg-198	104	10			PROPN
fuelectenerg-198	104	11	2	2	NUM
fuelectenerg-198	104	12	3	3	NUM
fuelectenerg-198	104	13	if	if	SCONJ
fuelectenerg-198	104	14	if	if	SCONJ
fuelectenerg-198	104	15	if	if	SCONJ
fuelectenerg-198	104	16	3	3	NUM
fuelectenerg-198	104	17	2	2	NUM
fuelectenerg-198	104	18	if	if	SCONJ
fuelectenerg-198	104	19	2	2	NUM
fuelectenerg-198	104	20	td	td	NOUN
fuelectenerg-198	104	21	11	11	NUM
fuelectenerg-198	104	22	3	3	NUM
fuelectenerg-198	104	23	28	28	NUM
fuelectenerg-198	104	24	exp	exp	NOUN
fuelectenerg-198	104	25	8	8	NUM
fuelectenerg-198	104	26	e	e	NOUN
fuelectenerg-198	104	27	d	d	NOUN
fuelectenerg-198	104	28	he	he	PRON
fuelectenerg-198	104	29	qm	qm	PROPN
fuelectenerg-198	104	30	e	e	PROPN
fuelectenerg-198	104	31	h	h	NOUN
fuelectenerg-198	104	32	q	q	PROPN
fuelectenerg-198	104	33	j	j	PROPN
fuelectenerg-198	104	34			NOUN
fuelectenerg-198	104	35			VERB
fuelectenerg-198	104	36			NOUN
fuelectenerg-198	104	37	(	(	PUNCT
fuelectenerg-198	104	38	2	2	NUM
fuelectenerg-198	104	39	)	)	PUNCT
fuelectenerg-198	104	40	and	and	CCONJ
fuelectenerg-198	104	41	for	for	ADP
fuelectenerg-198	104	42	the	the	DET
fuelectenerg-198	104	43	fowler	fowler	PROPN
fuelectenerg-198	104	44	-	-	PUNCT
fuelectenerg-198	104	45	nordheim	nordheim	PROPN
fuelectenerg-198	104	46	injection	injection	NOUN
fuelectenerg-198	104	47	with	with	ADP
fuelectenerg-198	104	48	(	(	PUNCT
fuelectenerg-198	104	49	jfn	jfn	NOUN
fuelectenerg-198	104	50	)	)	PUNCT
fuelectenerg-198	104	51			NOUN
fuelectenerg-198	105	1			PROPN
fuelectenerg-198	105	2			NOUN
fuelectenerg-198	105	3			PROPN
fuelectenerg-198	105	4			NOUN
fuelectenerg-198	105	5			PROPN
fuelectenerg-198	105	6			PROPN
fuelectenerg-198	105	7			NOUN
fuelectenerg-198	105	8			PROPN
fuelectenerg-198	105	9			PROPN
fuelectenerg-198	105	10	if	if	SCONJ
fuelectenerg-198	105	11	3	3	NUM
fuelectenerg-198	105	12	2	2	NUM
fuelectenerg-198	105	13	if	if	SCONJ
fuelectenerg-198	105	14	2	2	NUM
fuelectenerg-198	105	15	fn	fn	NOUN
fuelectenerg-198	105	16	3	3	NUM
fuelectenerg-198	105	17	28	28	NUM
fuelectenerg-198	105	18	exp	exp	NOUN
fuelectenerg-198	105	19	8	8	NUM
fuelectenerg-198	105	20	he	he	NOUN
fuelectenerg-198	105	21	qm	qm	PROPN
fuelectenerg-198	105	22	e	e	NOUN
fuelectenerg-198	105	23	h	h	NOUN
fuelectenerg-198	105	24	q	q	PROPN
fuelectenerg-198	105	25	j	j	PROPN
fuelectenerg-198	105	26			X
fuelectenerg-198	105	27			NOUN
fuelectenerg-198	105	28	,	,	PUNCT
fuelectenerg-198	105	29	(	(	PUNCT
fuelectenerg-198	105	30	3	3	X
fuelectenerg-198	105	31	)	)	PUNCT
fuelectenerg-198	105	32	where	where	SCONJ
fuelectenerg-198	105	33	q	q	NOUN
fuelectenerg-198	105	34	is	be	AUX
fuelectenerg-198	105	35	the	the	DET
fuelectenerg-198	105	36	electron	electron	NOUN
fuelectenerg-198	105	37	charge	charge	NOUN
fuelectenerg-198	105	38	,	,	PUNCT
fuelectenerg-198	105	39	h	h	NOUN
fuelectenerg-198	105	40	is	be	AUX
fuelectenerg-198	105	41	the	the	DET
fuelectenerg-198	105	42	planck	planck	NOUN
fuelectenerg-198	105	43	’s	’s	PART
fuelectenerg-198	105	44	constant	constant	ADJ
fuelectenerg-198	105	45	,	,	PUNCT
fuelectenerg-198	105	46	m	m	VERB
fuelectenerg-198	105	47	*	*	VERB
fuelectenerg-198	105	48	is	be	AUX
fuelectenerg-198	105	49	the	the	DET
fuelectenerg-198	105	50	effective	effective	ADJ
fuelectenerg-198	105	51	tunneling	tunneling	NOUN
fuelectenerg-198	105	52	mass	mass	NOUN
fuelectenerg-198	105	53	of	of	ADP
fuelectenerg-198	105	54	charge	charge	NOUN
fuelectenerg-198	105	55	carriers	carrier	NOUN
fuelectenerg-198	105	56	injected	inject	VERB
fuelectenerg-198	105	57	through	through	ADP
fuelectenerg-198	105	58	the	the	DET
fuelectenerg-198	105	59	interfacial	interfacial	ADJ
fuelectenerg-198	105	60	layer	layer	NOUN
fuelectenerg-198	105	61	,	,	PUNCT
fuelectenerg-198	105	62	dif	dif	X
fuelectenerg-198	105	63	is	be	AUX
fuelectenerg-198	105	64	the	the	DET
fuelectenerg-198	105	65	thickness	thickness	NOUN
fuelectenerg-198	105	66	of	of	ADP
fuelectenerg-198	105	67	the	the	DET
fuelectenerg-198	105	68	interfacial	interfacial	ADJ
fuelectenerg-198	105	69	layer	layer	NOUN
fuelectenerg-198	105	70	,	,	PUNCT
fuelectenerg-198	105	71			NOUN
fuelectenerg-198	105	72	is	be	AUX
fuelectenerg-198	105	73	the	the	DET
fuelectenerg-198	105	74	tunneling	tunneling	NOUN
fuelectenerg-198	105	75	barrier	barrier	NOUN
fuelectenerg-198	105	76	height	height	NOUN
fuelectenerg-198	105	77	and	and	CCONJ
fuelectenerg-198	105	78	eif	eif	NOUN
fuelectenerg-198	105	79	is	be	AUX
fuelectenerg-198	105	80	the	the	DET
fuelectenerg-198	105	81	electric	electric	ADJ
fuelectenerg-198	105	82	field	field	NOUN
fuelectenerg-198	105	83	in	in	ADP
fuelectenerg-198	105	84	it	it	PRON
fuelectenerg-198	105	85	.	.	PUNCT
fuelectenerg-198	106	1	the	the	DET
fuelectenerg-198	106	2	total	total	ADJ
fuelectenerg-198	106	3	current	current	ADJ
fuelectenerg-198	106	4	density	density	NOUN
fuelectenerg-198	106	5	flowing	flow	VERB
fuelectenerg-198	106	6	through	through	ADP
fuelectenerg-198	106	7	the	the	DET
fuelectenerg-198	106	8	interfacial	interfacial	ADJ
fuelectenerg-198	106	9	layer	layer	NOUN
fuelectenerg-198	106	10	(	(	PUNCT
fuelectenerg-198	106	11	jif	jif	PROPN
fuelectenerg-198	106	12	)	)	PUNCT
fuelectenerg-198	106	13	is	be	AUX
fuelectenerg-198	106	14	given	give	VERB
fuelectenerg-198	106	15	by	by	ADP
fuelectenerg-198	106	16	the	the	DET
fuelectenerg-198	106	17	following	follow	VERB
fuelectenerg-198	106	18	expression	expression	NOUN
fuelectenerg-198	106	19	:	:	PUNCT
fuelectenerg-198	106	20	ifif	ifif	NOUN
fuelectenerg-198	106	21	ifif	ifif	NOUN
fuelectenerg-198	106	22	fn	fn	PROPN
fuelectenerg-198	106	23	td	td	ADV
fuelectenerg-198	106	24	hcif	hcif	VERB
fuelectenerg-198	106	25	de	de	X
fuelectenerg-198	106	26	de	de	PROPN
fuelectenerg-198	106	27	j	j	PROPN
fuelectenerg-198	106	28	j	j	PROPN
fuelectenerg-198	106	29	jj	jj	PROPN
fuelectenerg-198	106	30			PROPN
fuelectenerg-198	106	31			NOUN
fuelectenerg-198	106	32			NUM
fuelectenerg-198	106	33			NOUN
fuelectenerg-198	106	34			VERB
fuelectenerg-198	106	35			NUM
fuelectenerg-198	106	36			ADV
fuelectenerg-198	107	1			ADJ
fuelectenerg-198	107	2	,	,	PUNCT
fuelectenerg-198	107	3	(	(	PUNCT
fuelectenerg-198	107	4	4	4	NUM
fuelectenerg-198	107	5	)	)	PUNCT
fuelectenerg-198	107	6	and	and	CCONJ
fuelectenerg-198	107	7	the	the	DET
fuelectenerg-198	107	8	voltage	voltage	NOUN
fuelectenerg-198	107	9	drop	drop	NOUN
fuelectenerg-198	107	10	on	on	ADP
fuelectenerg-198	107	11	the	the	DET
fuelectenerg-198	107	12	interfacial	interfacial	ADJ
fuelectenerg-198	107	13	layer	layer	NOUN
fuelectenerg-198	107	14	(	(	PUNCT
fuelectenerg-198	107	15	eif	eif	NOUN
fuelectenerg-198	107	16	)	)	PUNCT
fuelectenerg-198	107	17	is	be	AUX
fuelectenerg-198	107	18	ififif	ififif	ADJ
fuelectenerg-198	107	19	edv	edv	NOUN
fuelectenerg-198	107	20			PROPN
fuelectenerg-198	107	21	.	.	PUNCT
fuelectenerg-198	108	1	(	(	PUNCT
fuelectenerg-198	108	2	5	5	X
fuelectenerg-198	108	3	)	)	PUNCT
fuelectenerg-198	108	4	physical	physical	ADJ
fuelectenerg-198	108	5	modeling	modeling	NOUN
fuelectenerg-198	108	6	of	of	ADP
fuelectenerg-198	108	7	ta2o5	ta2o5	PROPN
fuelectenerg-198	108	8	based	base	VERB
fuelectenerg-198	108	9	mos	mos	PROPN
fuelectenerg-198	108	10	capacitors	capacitor	NOUN
fuelectenerg-198	108	11	on	on	ADP
fuelectenerg-198	108	12	si	si	PROPN
fuelectenerg-198	108	13	265	265	NUM
fuelectenerg-198	108	14	the	the	DET
fuelectenerg-198	108	15	current	current	ADJ
fuelectenerg-198	108	16	density	density	NOUN
fuelectenerg-198	108	17	due	due	ADP
fuelectenerg-198	108	18	to	to	ADP
fuelectenerg-198	108	19	the	the	DET
fuelectenerg-198	108	20	poole	poole	ADJ
fuelectenerg-198	108	21	-	-	PUNCT
fuelectenerg-198	108	22	frenkel	frenkel	NOUN
fuelectenerg-198	108	23	effect	effect	NOUN
fuelectenerg-198	108	24	in	in	ADP
fuelectenerg-198	108	25	the	the	DET
fuelectenerg-198	108	26	high	high	ADJ
fuelectenerg-198	108	27	-	-	PUNCT
fuelectenerg-198	108	28	k	k	NOUN
fuelectenerg-198	108	29	layer	layer	NOUN
fuelectenerg-198	108	30	(	(	PUNCT
fuelectenerg-198	108	31	jpf	jpf	PROPN
fuelectenerg-198	108	32	)	)	PUNCT
fuelectenerg-198	108	33	is	be	AUX
fuelectenerg-198	108	34	described	describe	VERB
fuelectenerg-198	108	35	by	by	ADP
fuelectenerg-198	108	36	the	the	DET
fuelectenerg-198	108	37	following	follow	VERB
fuelectenerg-198	108	38	expression	expression	NOUN
fuelectenerg-198	108	39	:	:	PUNCT
fuelectenerg-198	108	40	3	3	NUM
fuelectenerg-198	108	41	pf	pf	PROPN
fuelectenerg-198	108	42	hk	hk	PROPN
fuelectenerg-198	108	43	hk	hk	PROPN
fuelectenerg-198	108	44	hk	hk	PROPN
fuelectenerg-198	108	45	0	0	NUM
fuelectenerg-198	108	46	t	t	PROPN
fuelectenerg-198	108	47	1	1	NUM
fuelectenerg-198	108	48	q	q	PROPN
fuelectenerg-198	108	49	j	j	PROPN
fuelectenerg-198	108	50	(	(	PUNCT
fuelectenerg-198	108	51	0)e	0)e	ADJ
fuelectenerg-198	108	52	exp	exp	NOUN
fuelectenerg-198	108	53	e	e	PROPN
fuelectenerg-198	108	54	rkt	rkt	PROPN
fuelectenerg-198	108	55	k	k	PROPN
fuelectenerg-198	108	56			PROPN
fuelectenerg-198	108	57			PROPN
fuelectenerg-198	109	1			PROPN
fuelectenerg-198	109	2			NOUN
fuelectenerg-198	109	3			PROPN
fuelectenerg-198	109	4			PROPN
fuelectenerg-198	109	5			PROPN
fuelectenerg-198	109	6			PROPN
fuelectenerg-198	109	7			NOUN
fuelectenerg-198	109	8	,	,	PUNCT
fuelectenerg-198	109	9	(	(	PUNCT
fuelectenerg-198	109	10	6	6	NUM
fuelectenerg-198	109	11	)	)	PUNCT
fuelectenerg-198	109	12	where	where	SCONJ
fuelectenerg-198	109	13	hk(0	hk(0	NOUN
fuelectenerg-198	109	14	)	)	PUNCT
fuelectenerg-198	109	15	is	be	AUX
fuelectenerg-198	109	16	a	a	DET
fuelectenerg-198	109	17	temperature	temperature	NOUN
fuelectenerg-198	109	18	dependent	dependent	ADJ
fuelectenerg-198	109	19	defect	defect	NOUN
fuelectenerg-198	109	20	related	relate	VERB
fuelectenerg-198	109	21	constant	constant	ADJ
fuelectenerg-198	109	22	having	have	VERB
fuelectenerg-198	109	23	dimensions	dimension	NOUN
fuelectenerg-198	109	24	of	of	ADP
fuelectenerg-198	109	25	conductivity	conductivity	NOUN
fuelectenerg-198	109	26	,	,	PUNCT
fuelectenerg-198	109	27	r	r	NOUN
fuelectenerg-198	109	28	is	be	AUX
fuelectenerg-198	109	29	the	the	DET
fuelectenerg-198	109	30	degree	degree	NOUN
fuelectenerg-198	109	31	of	of	ADP
fuelectenerg-198	109	32	compensation	compensation	NOUN
fuelectenerg-198	109	33	[	[	X
fuelectenerg-198	109	34	47	47	NUM
fuelectenerg-198	109	35	]	]	PUNCT
fuelectenerg-198	109	36	,	,	PUNCT
fuelectenerg-198	109	37	k	k	PROPN
fuelectenerg-198	109	38	is	be	AUX
fuelectenerg-198	109	39	the	the	DET
fuelectenerg-198	109	40	boltzmann	boltzmann	PROPN
fuelectenerg-198	109	41	constant	constant	PROPN
fuelectenerg-198	109	42	,	,	PUNCT
fuelectenerg-198	109	43	0	0	PROPN
fuelectenerg-198	109	44	is	be	AUX
fuelectenerg-198	109	45	the	the	DET
fuelectenerg-198	109	46	dielectric	dielectric	ADJ
fuelectenerg-198	109	47	permittivity	permittivity	NOUN
fuelectenerg-198	109	48	in	in	ADP
fuelectenerg-198	109	49	vacuum	vacuum	PROPN
fuelectenerg-198	109	50	,	,	PUNCT
fuelectenerg-198	109	51	kt	kt	PROPN
fuelectenerg-198	109	52	is	be	AUX
fuelectenerg-198	109	53	the	the	DET
fuelectenerg-198	109	54	optical	optical	ADJ
fuelectenerg-198	109	55	frequency	frequency	NOUN
fuelectenerg-198	109	56	dielectric	dielectric	ADJ
fuelectenerg-198	109	57	constant	constant	ADJ
fuelectenerg-198	109	58	of	of	ADP
fuelectenerg-198	109	59	the	the	DET
fuelectenerg-198	109	60	high	high	ADJ
fuelectenerg-198	109	61	-	-	PUNCT
fuelectenerg-198	109	62	k	k	NOUN
fuelectenerg-198	109	63	dielectric	dielectric	NOUN
fuelectenerg-198	109	64	and	and	CCONJ
fuelectenerg-198	109	65	ehk	ehk	VERB
fuelectenerg-198	109	66	is	be	AUX
fuelectenerg-198	109	67	the	the	DET
fuelectenerg-198	109	68	electric	electric	NOUN
fuelectenerg-198	109	69	filed	file	VERB
fuelectenerg-198	109	70	in	in	ADP
fuelectenerg-198	109	71	it	it	PRON
fuelectenerg-198	109	72	.	.	PUNCT
fuelectenerg-198	110	1	the	the	DET
fuelectenerg-198	110	2	voltage	voltage	NOUN
fuelectenerg-198	110	3	drop	drop	NOUN
fuelectenerg-198	110	4	on	on	ADP
fuelectenerg-198	110	5	the	the	DET
fuelectenerg-198	110	6	layer	layer	NOUN
fuelectenerg-198	110	7	(	(	PUNCT
fuelectenerg-198	110	8	vhk	vhk	NOUN
fuelectenerg-198	110	9	)	)	PUNCT
fuelectenerg-198	110	10	is	be	AUX
fuelectenerg-198	110	11	given	give	VERB
fuelectenerg-198	110	12	by	by	ADP
fuelectenerg-198	110	13	:	:	PUNCT
fuelectenerg-198	110	14	hkhkhk	hkhkhk	PROPN
fuelectenerg-198	110	15	edv	edv	PROPN
fuelectenerg-198	110	16			PROPN
fuelectenerg-198	110	17	,	,	PUNCT
fuelectenerg-198	110	18	(	(	PUNCT
fuelectenerg-198	110	19	7	7	X
fuelectenerg-198	110	20	)	)	PUNCT
fuelectenerg-198	110	21	where	where	SCONJ
fuelectenerg-198	110	22	dhk	dhk	PROPN
fuelectenerg-198	110	23	is	be	AUX
fuelectenerg-198	110	24	the	the	DET
fuelectenerg-198	110	25	thickness	thickness	NOUN
fuelectenerg-198	110	26	of	of	ADP
fuelectenerg-198	110	27	the	the	DET
fuelectenerg-198	110	28	high	high	ADJ
fuelectenerg-198	110	29	-	-	PUNCT
fuelectenerg-198	110	30	k	k	NOUN
fuelectenerg-198	110	31	dielectric	dielectric	ADJ
fuelectenerg-198	110	32	layer	layer	NOUN
fuelectenerg-198	110	33	.	.	PUNCT
fuelectenerg-198	111	1	the	the	DET
fuelectenerg-198	111	2	numerical	numerical	ADJ
fuelectenerg-198	111	3	procedure	procedure	NOUN
fuelectenerg-198	111	4	consists	consist	VERB
fuelectenerg-198	111	5	in	in	ADP
fuelectenerg-198	111	6	simultaneous	simultaneous	ADJ
fuelectenerg-198	111	7	computation	computation	NOUN
fuelectenerg-198	111	8	of	of	ADP
fuelectenerg-198	111	9	the	the	DET
fuelectenerg-198	111	10	two	two	NUM
fuelectenerg-198	111	11	following	follow	VERB
fuelectenerg-198	111	12	quantities	quantity	NOUN
fuelectenerg-198	111	13	:	:	PUNCT
fuelectenerg-198	111	14	the	the	DET
fuelectenerg-198	111	15	oxide	oxide	NOUN
fuelectenerg-198	111	16	voltage	voltage	NOUN
fuelectenerg-198	111	17	:	:	PUNCT
fuelectenerg-198	111	18	ififhkhkifhkox	ififhkhkifhkox	PROPN
fuelectenerg-198	111	19	ededvvv	ededvvv	NOUN
fuelectenerg-198	111	20			PROPN
fuelectenerg-198	111	21	(	(	PUNCT
fuelectenerg-198	111	22	8)	8)	NUM
fuelectenerg-198	111	23	and	and	CCONJ
fuelectenerg-198	111	24	the	the	DET
fuelectenerg-198	111	25	current	current	ADJ
fuelectenerg-198	111	26	density	density	NOUN
fuelectenerg-198	111	27	in	in	ADP
fuelectenerg-198	111	28	steady	steady	ADJ
fuelectenerg-198	111	29	state	state	NOUN
fuelectenerg-198	111	30	(	(	PUNCT
fuelectenerg-198	111	31	kirchhoff	kirchhoff	NOUN
fuelectenerg-198	111	32	’s	’s	PART
fuelectenerg-198	111	33	laws	law	NOUN
fuelectenerg-198	111	34	)	)	PUNCT
fuelectenerg-198	111	35	ifpf	ifpf	PROPN
fuelectenerg-198	111	36	jjj	jjj	NOUN
fuelectenerg-198	111	37			NUM
fuelectenerg-198	111	38	.	.	PUNCT
fuelectenerg-198	112	1	(	(	PUNCT
fuelectenerg-198	112	2	9	9	X
fuelectenerg-198	112	3	)	)	PUNCT
fuelectenerg-198	112	4	first	first	ADV
fuelectenerg-198	112	5	the	the	DET
fuelectenerg-198	112	6	current	current	ADJ
fuelectenerg-198	112	7	density	density	NOUN
fuelectenerg-198	112	8	j	j	PROPN
fuelectenerg-198	113	1	=	=	SYM
fuelectenerg-198	113	2	jif	jif	PROPN
fuelectenerg-198	113	3	was	be	AUX
fuelectenerg-198	113	4	determined	determine	VERB
fuelectenerg-198	113	5	for	for	ADP
fuelectenerg-198	113	6	a	a	DET
fuelectenerg-198	113	7	given	give	VERB
fuelectenerg-198	113	8	field	field	NOUN
fuelectenerg-198	113	9	eif	eif	NOUN
fuelectenerg-198	113	10	in	in	ADP
fuelectenerg-198	113	11	the	the	DET
fuelectenerg-198	113	12	interfacial	interfacial	ADJ
fuelectenerg-198	113	13	layer	layer	NOUN
fuelectenerg-198	113	14	.	.	PUNCT
fuelectenerg-198	114	1	then	then	ADV
fuelectenerg-198	114	2	the	the	DET
fuelectenerg-198	114	3	field	field	NOUN
fuelectenerg-198	114	4	in	in	ADP
fuelectenerg-198	114	5	the	the	DET
fuelectenerg-198	114	6	high	high	ADJ
fuelectenerg-198	114	7	-	-	PUNCT
fuelectenerg-198	114	8	k	k	NOUN
fuelectenerg-198	114	9	layer	layer	NOUN
fuelectenerg-198	114	10	was	be	AUX
fuelectenerg-198	114	11	computed	compute	VERB
fuelectenerg-198	114	12	as	as	ADP
fuelectenerg-198	114	13	an	an	DET
fuelectenerg-198	114	14	inverse	inverse	NOUN
fuelectenerg-198	114	15	function	function	NOUN
fuelectenerg-198	114	16	of	of	ADP
fuelectenerg-198	114	17	the	the	DET
fuelectenerg-198	114	18	current	current	ADJ
fuelectenerg-198	114	19	density	density	NOUN
fuelectenerg-198	114	20	jhk	jhk	NOUN
fuelectenerg-198	114	21	=	=	PUNCT
fuelectenerg-198	114	22	j.	j.	PROPN
fuelectenerg-198	114	23	at	at	ADP
fuelectenerg-198	114	24	the	the	DET
fuelectenerg-198	114	25	end	end	NOUN
fuelectenerg-198	114	26	,	,	PUNCT
fuelectenerg-198	114	27	the	the	DET
fuelectenerg-198	114	28	oxide	oxide	NOUN
fuelectenerg-198	114	29	voltage	voltage	NOUN
fuelectenerg-198	114	30	was	be	AUX
fuelectenerg-198	114	31	calculated	calculate	VERB
fuelectenerg-198	114	32	with	with	ADP
fuelectenerg-198	114	33	the	the	DET
fuelectenerg-198	114	34	use	use	NOUN
fuelectenerg-198	114	35	of	of	ADP
fuelectenerg-198	114	36	the	the	DET
fuelectenerg-198	114	37	expression	expression	NOUN
fuelectenerg-198	114	38	(	(	PUNCT
fuelectenerg-198	114	39	8)	8)	NUM
fuelectenerg-198	114	40	.	.	PUNCT
fuelectenerg-198	115	1	we	we	PRON
fuelectenerg-198	115	2	intend	intend	VERB
fuelectenerg-198	115	3	to	to	PART
fuelectenerg-198	115	4	use	use	VERB
fuelectenerg-198	115	5	minimum	minimum	NOUN
fuelectenerg-198	115	6	of	of	ADP
fuelectenerg-198	115	7	fitting	fitting	ADJ
fuelectenerg-198	115	8	parameters	parameter	NOUN
fuelectenerg-198	115	9	.	.	PUNCT
fuelectenerg-198	116	1	the	the	DET
fuelectenerg-198	116	2	defect	defect	ADJ
fuelectenerg-198	116	3	density	density	NOUN
fuelectenerg-198	116	4	parameter	parameter	NOUN
fuelectenerg-198	116	5	for	for	ADP
fuelectenerg-198	116	6	high	high	ADJ
fuelectenerg-198	116	7	-	-	PUNCT
fuelectenerg-198	116	8	k	k	NOUN
fuelectenerg-198	116	9	layer	layer	NOUN
fuelectenerg-198	116	10	was	be	AUX
fuelectenerg-198	116	11	first	first	ADV
fuelectenerg-198	116	12	chosen	choose	VERB
fuelectenerg-198	116	13	because	because	SCONJ
fuelectenerg-198	116	14	it	it	PRON
fuelectenerg-198	116	15	is	be	AUX
fuelectenerg-198	116	16	dependent	dependent	ADJ
fuelectenerg-198	116	17	on	on	ADP
fuelectenerg-198	116	18	the	the	DET
fuelectenerg-198	116	19	technological	technological	ADJ
fuelectenerg-198	116	20	parameters	parameter	NOUN
fuelectenerg-198	116	21	and	and	CCONJ
fuelectenerg-198	116	22	is	be	AUX
fuelectenerg-198	116	23	difficult	difficult	ADJ
fuelectenerg-198	116	24	to	to	PART
fuelectenerg-198	116	25	be	be	AUX
fuelectenerg-198	116	26	determined	determine	VERB
fuelectenerg-198	116	27	by	by	ADP
fuelectenerg-198	116	28	independent	independent	ADJ
fuelectenerg-198	116	29	methods	method	NOUN
fuelectenerg-198	116	30	.	.	PUNCT
fuelectenerg-198	117	1	silicon	silicon	NOUN
fuelectenerg-198	117	2	dioxide	dioxide	NOUN
fuelectenerg-198	117	3	layer	layer	NOUN
fuelectenerg-198	117	4	thickness	thickness	NOUN
fuelectenerg-198	117	5	was	be	AUX
fuelectenerg-198	117	6	also	also	ADV
fuelectenerg-198	117	7	treated	treat	VERB
fuelectenerg-198	117	8	as	as	ADP
fuelectenerg-198	117	9	a	a	DET
fuelectenerg-198	117	10	fitting	fitting	ADJ
fuelectenerg-198	117	11	parameter	parameter	NOUN
fuelectenerg-198	117	12	in	in	ADP
fuelectenerg-198	117	13	a	a	DET
fuelectenerg-198	117	14	restricted	restricted	ADJ
fuelectenerg-198	117	15	range	range	NOUN
fuelectenerg-198	117	16	(	(	PUNCT
fuelectenerg-198	117	17	2	2	NUM
fuelectenerg-198	117	18	to	to	PART
fuelectenerg-198	117	19	3	3	NUM
fuelectenerg-198	117	20	nm	nm	NOUN
fuelectenerg-198	117	21	)	)	PUNCT
fuelectenerg-198	117	22	close	close	ADV
fuelectenerg-198	117	23	to	to	ADP
fuelectenerg-198	117	24	the	the	DET
fuelectenerg-198	117	25	measured	measured	ADJ
fuelectenerg-198	117	26	value	value	NOUN
fuelectenerg-198	117	27	,	,	PUNCT
fuelectenerg-198	117	28	because	because	SCONJ
fuelectenerg-198	117	29	the	the	DET
fuelectenerg-198	117	30	small	small	ADJ
fuelectenerg-198	117	31	variations	variation	NOUN
fuelectenerg-198	117	32	in	in	ADP
fuelectenerg-198	117	33	it	it	PRON
fuelectenerg-198	117	34	cause	cause	VERB
fuelectenerg-198	117	35	substantial	substantial	ADJ
fuelectenerg-198	117	36	variations	variation	NOUN
fuelectenerg-198	117	37	in	in	ADP
fuelectenerg-198	117	38	the	the	DET
fuelectenerg-198	117	39	result	result	NOUN
fuelectenerg-198	117	40	.	.	PUNCT
fuelectenerg-198	118	1	later	later	ADV
fuelectenerg-198	118	2	,	,	PUNCT
fuelectenerg-198	118	3	these	these	DET
fuelectenerg-198	118	4	results	result	NOUN
fuelectenerg-198	118	5	were	be	AUX
fuelectenerg-198	118	6	compared	compare	VERB
fuelectenerg-198	118	7	with	with	ADP
fuelectenerg-198	118	8	independent	independent	ADJ
fuelectenerg-198	118	9	measurements	measurement	NOUN
fuelectenerg-198	118	10	.	.	PUNCT
fuelectenerg-198	119	1	the	the	DET
fuelectenerg-198	119	2	hoping	hoping	NOUN
fuelectenerg-198	119	3	conductivity	conductivity	NOUN
fuelectenerg-198	119	4	was	be	AUX
fuelectenerg-198	119	5	also	also	ADV
fuelectenerg-198	119	6	treated	treat	VERB
fuelectenerg-198	119	7	as	as	ADP
fuelectenerg-198	119	8	a	a	DET
fuelectenerg-198	119	9	fitting	fitting	ADJ
fuelectenerg-198	119	10	parameter	parameter	NOUN
fuelectenerg-198	119	11	,	,	PUNCT
fuelectenerg-198	119	12	since	since	SCONJ
fuelectenerg-198	119	13	there	there	PRON
fuelectenerg-198	119	14	are	be	VERB
fuelectenerg-198	119	15	no	no	DET
fuelectenerg-198	119	16	available	available	ADJ
fuelectenerg-198	119	17	data	datum	NOUN
fuelectenerg-198	119	18	from	from	ADP
fuelectenerg-198	119	19	independent	independent	ADJ
fuelectenerg-198	119	20	experiments	experiment	NOUN
fuelectenerg-198	119	21	.	.	PUNCT
fuelectenerg-198	120	1	because	because	SCONJ
fuelectenerg-198	120	2	the	the	DET
fuelectenerg-198	120	3	different	different	ADJ
fuelectenerg-198	120	4	mechanisms	mechanism	NOUN
fuelectenerg-198	120	5	do	do	AUX
fuelectenerg-198	120	6	not	not	PART
fuelectenerg-198	120	7	exclude	exclude	VERB
fuelectenerg-198	120	8	each	each	DET
fuelectenerg-198	120	9	other	other	ADJ
fuelectenerg-198	120	10	,	,	PUNCT
fuelectenerg-198	120	11	they	they	PRON
fuelectenerg-198	120	12	are	be	AUX
fuelectenerg-198	120	13	considered	consider	VERB
fuelectenerg-198	120	14	in	in	ADP
fuelectenerg-198	120	15	a	a	DET
fuelectenerg-198	120	16	single	single	ADJ
fuelectenerg-198	120	17	form	form	NOUN
fuelectenerg-198	120	18	for	for	ADP
fuelectenerg-198	120	19	the	the	DET
fuelectenerg-198	120	20	entire	entire	ADJ
fuelectenerg-198	120	21	measurement	measurement	NOUN
fuelectenerg-198	120	22	region	region	NOUN
fuelectenerg-198	120	23	;	;	PUNCT
fuelectenerg-198	120	24	as	as	SCONJ
fuelectenerg-198	120	25	we	we	PRON
fuelectenerg-198	120	26	discussed	discuss	VERB
fuelectenerg-198	120	27	in	in	ADP
fuelectenerg-198	120	28	[	[	X
fuelectenerg-198	120	29	48	48	NUM
fuelectenerg-198	120	30	]	]	PUNCT
fuelectenerg-198	120	31	,	,	PUNCT
fuelectenerg-198	120	32	this	this	DET
fuelectenerg-198	120	33	approach	approach	NOUN
fuelectenerg-198	120	34	is	be	AUX
fuelectenerg-198	120	35	unavoidable	unavoidable	ADJ
fuelectenerg-198	120	36	in	in	ADP
fuelectenerg-198	120	37	the	the	DET
fuelectenerg-198	120	38	case	case	NOUN
fuelectenerg-198	120	39	of	of	ADP
fuelectenerg-198	120	40	nano	nano	NOUN
fuelectenerg-198	120	41	-	-	PUNCT
fuelectenerg-198	120	42	layered	layer	VERB
fuelectenerg-198	120	43	dielectrics	dielectric	NOUN
fuelectenerg-198	120	44	where	where	SCONJ
fuelectenerg-198	120	45	the	the	DET
fuelectenerg-198	120	46	effects	effect	NOUN
fuelectenerg-198	120	47	of	of	ADP
fuelectenerg-198	120	48	contributions	contribution	NOUN
fuelectenerg-198	120	49	of	of	ADP
fuelectenerg-198	120	50	different	different	ADJ
fuelectenerg-198	120	51	conduction	conduction	NOUN
fuelectenerg-198	120	52	mechanisms	mechanism	NOUN
fuelectenerg-198	120	53	can	can	AUX
fuelectenerg-198	120	54	not	not	PART
fuelectenerg-198	120	55	be	be	AUX
fuelectenerg-198	120	56	separated	separate	VERB
fuelectenerg-198	120	57	but	but	CCONJ
fuelectenerg-198	120	58	standard	standard	ADJ
fuelectenerg-198	120	59	methods	method	NOUN
fuelectenerg-198	120	60	a	a	DET
fuelectenerg-198	120	61	single	single	ADJ
fuelectenerg-198	120	62	assuming	assume	VERB
fuelectenerg-198	120	63	dominant	dominant	ADJ
fuelectenerg-198	120	64	conduction	conduction	NOUN
fuelectenerg-198	120	65	mechanism	mechanism	NOUN
fuelectenerg-198	120	66	in	in	ADP
fuelectenerg-198	120	67	a	a	DET
fuelectenerg-198	120	68	given	give	VERB
fuelectenerg-198	120	69	voltage	voltage	NOUN
fuelectenerg-198	120	70	range	range	NOUN
fuelectenerg-198	120	71	.	.	PUNCT
fuelectenerg-198	121	1	in	in	ADP
fuelectenerg-198	121	2	the	the	DET
fuelectenerg-198	121	3	case	case	NOUN
fuelectenerg-198	121	4	of	of	ADP
fuelectenerg-198	121	5	al	al	PROPN
fuelectenerg-198	121	6	-	-	PUNCT
fuelectenerg-198	121	7	ta2o5	ta2o5	PROPN
fuelectenerg-198	121	8	/	/	SYM
fuelectenerg-198	121	9	sio2	sio2	PROPN
fuelectenerg-198	121	10	-	-	PUNCT
fuelectenerg-198	121	11	si	si	ADJ
fuelectenerg-198	121	12	structures	structure	NOUN
fuelectenerg-198	121	13	following	follow	VERB
fuelectenerg-198	121	14	typical	typical	ADJ
fuelectenerg-198	121	15	values	value	NOUN
fuelectenerg-198	121	16	can	can	AUX
fuelectenerg-198	121	17	be	be	AUX
fuelectenerg-198	121	18	taken	take	VERB
fuelectenerg-198	121	19	from	from	ADP
fuelectenerg-198	121	20	the	the	DET
fuelectenerg-198	121	21	literature	literature	NOUN
fuelectenerg-198	121	22	:	:	PUNCT
fuelectenerg-198	121	23	tunneling	tunnel	VERB
fuelectenerg-198	121	24	electron	electron	NOUN
fuelectenerg-198	121	25	mass	mass	NOUN
fuelectenerg-198	121	26	in	in	ADP
fuelectenerg-198	121	27	ultrathin	ultrathin	PROPN
fuelectenerg-198	121	28	sio2	sio2	PROPN
fuelectenerg-198	121	29	,	,	PUNCT
fuelectenerg-198	121	30	me	i	PRON
fuelectenerg-198	121	31	*	*	PUNCT
fuelectenerg-198	121	32	=	=	NOUN
fuelectenerg-198	121	33	0.61	0.61	NUM
fuelectenerg-198	121	34	me	i	PRON
fuelectenerg-198	122	1	[	[	X
fuelectenerg-198	122	2	49	49	NUM
fuelectenerg-198	122	3	]	]	PUNCT
fuelectenerg-198	122	4	,	,	PUNCT
fuelectenerg-198	122	5	where	where	SCONJ
fuelectenerg-198	122	6	me	i	PRON
fuelectenerg-198	122	7	denotes	denote	VERB
fuelectenerg-198	122	8	the	the	DET
fuelectenerg-198	122	9	mass	mass	NOUN
fuelectenerg-198	122	10	of	of	ADP
fuelectenerg-198	122	11	free	free	ADJ
fuelectenerg-198	122	12	electron	electron	NOUN
fuelectenerg-198	122	13	;	;	PUNCT
fuelectenerg-198	122	14	tunneling	tunnel	VERB
fuelectenerg-198	122	15	hole	hole	NOUN
fuelectenerg-198	122	16	mass	mass	NOUN
fuelectenerg-198	122	17	in	in	ADP
fuelectenerg-198	122	18	sio2	sio2	PROPN
fuelectenerg-198	122	19	,	,	PUNCT
fuelectenerg-198	122	20	mh	mh	PROPN
fuelectenerg-198	122	21	*	*	PROPN
fuelectenerg-198	122	22	=	=	PROPN
fuelectenerg-198	122	23	0.51	0.51	NUM
fuelectenerg-198	122	24	me	i	PRON
fuelectenerg-198	122	25	;	;	PUNCT
fuelectenerg-198	122	26	optical	optical	ADJ
fuelectenerg-198	122	27	frequency	frequency	NOUN
fuelectenerg-198	122	28	dielectric	dielectric	NOUN
fuelectenerg-198	122	29	constant	constant	ADJ
fuelectenerg-198	122	30	of	of	ADP
fuelectenerg-198	122	31	ta2o5	ta2o5	PROPN
fuelectenerg-198	122	32	,	,	PUNCT
fuelectenerg-198	122	33	kt	kt	PROPN
fuelectenerg-198	122	34	=	=	SYM
fuelectenerg-198	122	35	n	n	PRON
fuelectenerg-198	122	36	2	2	NUM
fuelectenerg-198	122	37	=	=	SYM
fuelectenerg-198	122	38	2.1	2.1	NUM
fuelectenerg-198	122	39	2	2	NUM
fuelectenerg-198	122	40	=	=	SYM
fuelectenerg-198	122	41	4.4	4.4	NUM
fuelectenerg-198	122	42	;	;	PUNCT
fuelectenerg-198	122	43	tunneling	tunnel	VERB
fuelectenerg-198	122	44	barrier	barrier	NOUN
fuelectenerg-198	122	45	height	height	NOUN
fuelectenerg-198	122	46	for	for	ADP
fuelectenerg-198	122	47	of	of	ADP
fuelectenerg-198	122	48	holes	hole	NOUN
fuelectenerg-198	122	49	in	in	ADP
fuelectenerg-198	122	50	sio2	sio2	PROPN
fuelectenerg-198	122	51	;	;	PUNCT
fuelectenerg-198	122	52	h	h	X
fuelectenerg-198	122	53	=	=	SYM
fuelectenerg-198	122	54	4.70	4.70	NUM
fuelectenerg-198	122	55	ev	ev	X
fuelectenerg-198	123	1	[	[	X
fuelectenerg-198	123	2	49	49	NUM
fuelectenerg-198	123	3	]	]	PUNCT
fuelectenerg-198	123	4	;	;	PUNCT
fuelectenerg-198	123	5	tunneling	tunnel	VERB
fuelectenerg-198	123	6	barrier	barrier	NOUN
fuelectenerg-198	123	7	height	height	NOUN
fuelectenerg-198	123	8	for	for	ADP
fuelectenerg-198	123	9	of	of	ADP
fuelectenerg-198	123	10	electrons	electron	NOUN
fuelectenerg-198	123	11	in	in	ADP
fuelectenerg-198	123	12	sio2	sio2	NOUN
fuelectenerg-198	123	13	,	,	PUNCT
fuelectenerg-198	123	14	e	e	X
fuelectenerg-198	123	15	=	=	SYM
fuelectenerg-198	123	16	3.15	3.15	NUM
fuelectenerg-198	123	17	ev	ev	NOUN
fuelectenerg-198	124	1	[	[	X
fuelectenerg-198	124	2	50	50	NUM
fuelectenerg-198	124	3	]	]	PUNCT
fuelectenerg-198	124	4	;	;	PUNCT
fuelectenerg-198	124	5	and	and	CCONJ
fuelectenerg-198	124	6	compensation	compensation	NOUN
fuelectenerg-198	124	7	factor	factor	NOUN
fuelectenerg-198	124	8	,	,	PUNCT
fuelectenerg-198	124	9	r	r	NOUN
fuelectenerg-198	124	10	=	=	SYM
fuelectenerg-198	124	11	1	1	NUM
fuelectenerg-198	124	12	(	(	PUNCT
fuelectenerg-198	124	13	we	we	PRON
fuelectenerg-198	124	14	consider	consider	VERB
fuelectenerg-198	124	15	the	the	DET
fuelectenerg-198	124	16	poole	poole	ADJ
fuelectenerg-198	124	17	-	-	PUNCT
fuelectenerg-198	124	18	frenkel	frenkel	NOUN
fuelectenerg-198	124	19	effect	effect	NOUN
fuelectenerg-198	124	20	without	without	ADP
fuelectenerg-198	124	21	compensation	compensation	NOUN
fuelectenerg-198	124	22	)	)	PUNCT
fuelectenerg-198	124	23	.	.	PUNCT
fuelectenerg-198	125	1	266	266	NUM
fuelectenerg-198	125	2	n.	n.	PROPN
fuelectenerg-198	125	3	novkovski	novkovski	ADJ
fuelectenerg-198	125	4	voltage	voltage	NOUN
fuelectenerg-198	125	5	on	on	ADP
fuelectenerg-198	125	6	the	the	DET
fuelectenerg-198	125	7	stacked	stacked	ADJ
fuelectenerg-198	125	8	insulating	insulate	VERB
fuelectenerg-198	125	9	layer	layer	NOUN
fuelectenerg-198	125	10	(	(	PUNCT
fuelectenerg-198	125	11	vox	vox	PROPN
fuelectenerg-198	125	12	)	)	PUNCT
fuelectenerg-198	125	13	can	can	AUX
fuelectenerg-198	125	14	be	be	AUX
fuelectenerg-198	125	15	calculated	calculate	VERB
fuelectenerg-198	125	16	by	by	ADP
fuelectenerg-198	125	17	using	use	VERB
fuelectenerg-198	125	18	relations	relation	NOUN
fuelectenerg-198	125	19	involving	involve	VERB
fuelectenerg-198	125	20	the	the	DET
fuelectenerg-198	125	21	flatband	flatband	NOUN
fuelectenerg-198	125	22	voltage	voltage	NOUN
fuelectenerg-198	125	23	(	(	PUNCT
fuelectenerg-198	125	24	vfb	vfb	PROPN
fuelectenerg-198	125	25	)	)	PUNCT
fuelectenerg-198	125	26	and	and	CCONJ
fuelectenerg-198	125	27	the	the	DET
fuelectenerg-198	125	28	voltage	voltage	NOUN
fuelectenerg-198	125	29	drop	drop	NOUN
fuelectenerg-198	125	30	in	in	ADP
fuelectenerg-198	125	31	the	the	DET
fuelectenerg-198	125	32	semiconductor	semiconductor	NOUN
fuelectenerg-198	125	33	(	(	PUNCT
fuelectenerg-198	125	34	vs	vs	X
fuelectenerg-198	125	35	):	):	PUNCT
fuelectenerg-198	125	36	sfbgox	sfbgox	NOUN
fuelectenerg-198	125	37	vvvv	vvvv	NOUN
fuelectenerg-198	125	38			PUNCT
fuelectenerg-198	125	39	.	.	PUNCT
fuelectenerg-198	126	1	(	(	PUNCT
fuelectenerg-198	126	2	10	10	NUM
fuelectenerg-198	126	3	)	)	PUNCT
fuelectenerg-198	126	4	the	the	DET
fuelectenerg-198	126	5	value	value	NOUN
fuelectenerg-198	126	6	of	of	ADP
fuelectenerg-198	126	7	the	the	DET
fuelectenerg-198	126	8	vfb	vfb	PROPN
fuelectenerg-198	126	9	was	be	AUX
fuelectenerg-198	126	10	determined	determine	VERB
fuelectenerg-198	126	11	with	with	ADP
fuelectenerg-198	126	12	the	the	DET
fuelectenerg-198	126	13	standard	standard	ADJ
fuelectenerg-198	126	14	method	method	NOUN
fuelectenerg-198	126	15	which	which	PRON
fuelectenerg-198	126	16	is	be	AUX
fuelectenerg-198	126	17	not	not	PART
fuelectenerg-198	126	18	described	describe	VERB
fuelectenerg-198	126	19	here	here	ADV
fuelectenerg-198	126	20	.	.	PUNCT
fuelectenerg-198	127	1	a	a	DET
fuelectenerg-198	127	2	low	low	ADJ
fuelectenerg-198	127	3	value	value	NOUN
fuelectenerg-198	127	4	of	of	ADP
fuelectenerg-198	127	5	the	the	DET
fuelectenerg-198	127	6	fixed	fix	VERB
fuelectenerg-198	127	7	charge	charge	NOUN
fuelectenerg-198	127	8	density	density	NOUN
fuelectenerg-198	127	9	in	in	ADP
fuelectenerg-198	127	10	the	the	DET
fuelectenerg-198	127	11	sio2	sio2	NOUN
fuelectenerg-198	127	12	was	be	AUX
fuelectenerg-198	127	13	assumed	assume	VERB
fuelectenerg-198	127	14	,	,	PUNCT
fuelectenerg-198	127	15	i.e.	i.e.	X
fuelectenerg-198	127	16	the	the	DET
fuelectenerg-198	127	17	ideal	ideal	ADJ
fuelectenerg-198	127	18	value	value	NOUN
fuelectenerg-198	127	19	of	of	ADP
fuelectenerg-198	127	20	the	the	DET
fuelectenerg-198	127	21	flatband	flatband	NOUN
fuelectenerg-198	127	22	voltage	voltage	NOUN
fuelectenerg-198	127	23	(	(	PUNCT
fuelectenerg-198	127	24	i	i	NOUN
fuelectenerg-198	127	25	d	d	PROPN
fuelectenerg-198	127	26	fbv	fbv	PROPN
fuelectenerg-198	127	27	)	)	PUNCT
fuelectenerg-198	127	28	was	be	AUX
fuelectenerg-198	127	29	used	use	VERB
fuelectenerg-198	127	30	.	.	PUNCT
fuelectenerg-198	128	1	this	this	DET
fuelectenerg-198	128	2	assumption	assumption	NOUN
fuelectenerg-198	128	3	will	will	AUX
fuelectenerg-198	128	4	be	be	AUX
fuelectenerg-198	128	5	discussed	discuss	VERB
fuelectenerg-198	128	6	later	later	ADV
fuelectenerg-198	128	7	,	,	PUNCT
fuelectenerg-198	128	8	though	though	SCONJ
fuelectenerg-198	128	9	it	it	PRON
fuelectenerg-198	128	10	can	can	AUX
fuelectenerg-198	128	11	be	be	AUX
fuelectenerg-198	128	12	simply	simply	ADV
fuelectenerg-198	128	13	treated	treat	VERB
fuelectenerg-198	128	14	as	as	ADP
fuelectenerg-198	128	15	an	an	DET
fuelectenerg-198	128	16	approximation	approximation	NOUN
fuelectenerg-198	128	17	that	that	PRON
fuelectenerg-198	128	18	holds	hold	VERB
fuelectenerg-198	128	19	for	for	ADP
fuelectenerg-198	128	20	insulating	insulate	VERB
fuelectenerg-198	128	21	films	film	NOUN
fuelectenerg-198	128	22	of	of	ADP
fuelectenerg-198	128	23	high	high	ADJ
fuelectenerg-198	128	24	quality	quality	NOUN
fuelectenerg-198	128	25	,	,	PUNCT
fuelectenerg-198	128	26	where	where	SCONJ
fuelectenerg-198	128	27	the	the	DET
fuelectenerg-198	128	28	oxide	oxide	NOUN
fuelectenerg-198	128	29	charge	charge	NOUN
fuelectenerg-198	128	30	density	density	NOUN
fuelectenerg-198	128	31	is	be	AUX
fuelectenerg-198	128	32	fairly	fairly	ADV
fuelectenerg-198	128	33	low	low	ADJ
fuelectenerg-198	128	34	.	.	PUNCT
fuelectenerg-198	129	1	the	the	DET
fuelectenerg-198	129	2	voltage	voltage	NOUN
fuelectenerg-198	129	3	drop	drop	NOUN
fuelectenerg-198	129	4	in	in	ADP
fuelectenerg-198	129	5	si	si	PROPN
fuelectenerg-198	129	6	(	(	PUNCT
fuelectenerg-198	129	7	vs	vs	ADP
fuelectenerg-198	129	8	)	)	PUNCT
fuelectenerg-198	129	9	is	be	AUX
fuelectenerg-198	129	10	connected	connect	VERB
fuelectenerg-198	129	11	with	with	ADP
fuelectenerg-198	129	12	the	the	DET
fuelectenerg-198	129	13	electric	electric	ADJ
fuelectenerg-198	129	14	field	field	NOUN
fuelectenerg-198	129	15	strength	strength	NOUN
fuelectenerg-198	129	16	in	in	ADP
fuelectenerg-198	129	17	the	the	DET
fuelectenerg-198	129	18	interfacial	interfacial	ADJ
fuelectenerg-198	129	19	layer	layer	NOUN
fuelectenerg-198	129	20	(	(	PUNCT
fuelectenerg-198	129	21	eif	eif	NOUN
fuelectenerg-198	129	22	)	)	PUNCT
fuelectenerg-198	129	23	by	by	ADP
fuelectenerg-198	129	24	the	the	DET
fuelectenerg-198	129	25	following	follow	VERB
fuelectenerg-198	129	26	expression	expression	NOUN
fuelectenerg-198	129	27	:	:	PUNCT
fuelectenerg-198	130	1			NUM
fuelectenerg-198	130	2			NUM
fuelectenerg-198	130	3			NUM
fuelectenerg-198	130	4			PROPN
fuelectenerg-198	130	5			NUM
fuelectenerg-198	130	6			NUM
fuelectenerg-198	130	7			NUM
fuelectenerg-198	130	8			NUM
fuelectenerg-198	130	9			ADV
fuelectenerg-198	130	10			VERB
fuelectenerg-198	130	11			NOUN
fuelectenerg-198	130	12			PROPN
fuelectenerg-198	130	13			PROPN
fuelectenerg-198	130	14			X
fuelectenerg-198	130	15			NOUN
fuelectenerg-198	130	16			X
fuelectenerg-198	130	17			VERB
fuelectenerg-198	130	18			PROPN
fuelectenerg-198	130	19			INTJ
fuelectenerg-198	130	20			PROPN
fuelectenerg-198	130	21			NOUN
fuelectenerg-198	130	22			PROPN
fuelectenerg-198	130	23			PROPN
fuelectenerg-198	130	24			PROPN
fuelectenerg-198	131	1			PROPN
fuelectenerg-198	131	2			NOUN
fuelectenerg-198	131	3			PROPN
fuelectenerg-198	131	4			PROPN
fuelectenerg-198	132	1			PROPN
fuelectenerg-198	132	2			NOUN
fuelectenerg-198	133	1			PROPN
fuelectenerg-198	133	2			PROPN
fuelectenerg-198	133	3			PROPN
fuelectenerg-198	134	1			PROPN
fuelectenerg-198	134	2			NOUN
fuelectenerg-198	134	3			PROPN
fuelectenerg-198	134	4			PROPN
fuelectenerg-198	134	5			PROPN
fuelectenerg-198	134	6			PROPN
fuelectenerg-198	134	7			PROPN
fuelectenerg-198	134	8			X
fuelectenerg-198	134	9			NOUN
fuelectenerg-198	134	10			X
fuelectenerg-198	134	11			VERB
fuelectenerg-198	134	12			PROPN
fuelectenerg-198	134	13			INTJ
fuelectenerg-198	134	14			PROPN
fuelectenerg-198	134	15			NOUN
fuelectenerg-198	135	1			PROPN
fuelectenerg-198	135	2			PROPN
fuelectenerg-198	135	3			PROPN
fuelectenerg-198	136	1			PROPN
fuelectenerg-198	136	2			NOUN
fuelectenerg-198	136	3			PROPN
fuelectenerg-198	136	4			PROPN
fuelectenerg-198	137	1			PROPN
fuelectenerg-198	137	2			NOUN
fuelectenerg-198	138	1			PROPN
fuelectenerg-198	138	2			PROPN
fuelectenerg-198	138	3			PROPN
fuelectenerg-198	139	1			PROPN
fuelectenerg-198	139	2			NOUN
fuelectenerg-198	139	3			PROPN
fuelectenerg-198	139	4			PROPN
fuelectenerg-198	139	5			PROPN
fuelectenerg-198	139	6			NOUN
fuelectenerg-198	139	7	si	si	NOUN
fuelectenerg-198	139	8	typen11	typen11	NOUN
fuelectenerg-198	139	9	2	2	NUM
fuelectenerg-198	139	10	si	si	NOUN
fuelectenerg-198	139	11	typep11	typep11	NOUN
fuelectenerg-198	139	12	2	2	NUM
fuelectenerg-198	139	13	ss	ss	NOUN
fuelectenerg-198	139	14	2	2	NUM
fuelectenerg-198	139	15	0	0	NUM
fuelectenerg-198	139	16	2	2	NUM
fuelectenerg-198	140	1	i	i	PRON
fuelectenerg-198	140	2	si	si	VERB
fuelectenerg-198	140	3	0	0	NUM
fuelectenerg-198	140	4	s	s	NOUN
fuelectenerg-198	140	5	2	2	NUM
fuelectenerg-198	140	6	0	0	NUM
fuelectenerg-198	140	7	2	2	NUM
fuelectenerg-198	140	8	is	be	AUX
fuelectenerg-198	140	9	si	si	PROPN
fuelectenerg-198	140	10	0	0	NUM
fuelectenerg-198	140	11	si	si	NOUN
fuelectenerg-198	140	12	ss	ss	NOUN
fuelectenerg-198	140	13	ss	ss	PROPN
fuelectenerg-198	140	14	kt	kt	PROPN
fuelectenerg-198	140	15	qv	qv	X
fuelectenerg-198	140	16	e	e	X
fuelectenerg-198	140	17	kt	kt	PROPN
fuelectenerg-198	140	18	qv	qv	PROPN
fuelectenerg-198	140	19	e	e	PROPN
fuelectenerg-198	140	20	n	n	CCONJ
fuelectenerg-198	140	21	nktn	nktn	PROPN
fuelectenerg-198	140	22	kt	kt	PROPN
fuelectenerg-198	140	23	qv	qv	PROPN
fuelectenerg-198	140	24	e	e	PROPN
fuelectenerg-198	140	25	p	p	PROPN
fuelectenerg-198	140	26	n	n	X
fuelectenerg-198	140	27	kt	kt	X
fuelectenerg-198	140	28	qv	qv	PROPN
fuelectenerg-198	140	29	e	e	PROPN
fuelectenerg-198	140	30	ktp	ktp	PROPN
fuelectenerg-198	140	31	e	e	PROPN
fuelectenerg-198	140	32	kt	kt	PROPN
fuelectenerg-198	140	33	qv	qv	PROPN
fuelectenerg-198	140	34	kt	kt	X
fuelectenerg-198	140	35	qv	qv	PROPN
fuelectenerg-198	140	36	kt	kt	X
fuelectenerg-198	140	37	qv	qv	PROPN
fuelectenerg-198	140	38	kt	kt	X
fuelectenerg-198	140	39	qv	qv	INTJ
fuelectenerg-198	140	40	if	if	SCONJ
fuelectenerg-198	140	41	if	if	SCONJ
fuelectenerg-198	140	42			PROPN
fuelectenerg-198	140	43			PROPN
fuelectenerg-198	140	44			PROPN
fuelectenerg-198	140	45			PROPN
fuelectenerg-198	140	46	.	.	PUNCT
fuelectenerg-198	141	1	(	(	PUNCT
fuelectenerg-198	141	2	11	11	NUM
fuelectenerg-198	141	3	)	)	PUNCT
fuelectenerg-198	141	4	where	where	SCONJ
fuelectenerg-198	141	5	si	si	NOUN
fuelectenerg-198	141	6	is	be	AUX
fuelectenerg-198	141	7	the	the	DET
fuelectenerg-198	141	8	relative	relative	ADJ
fuelectenerg-198	141	9	permittivity	permittivity	NOUN
fuelectenerg-198	141	10	of	of	ADP
fuelectenerg-198	141	11	silicon	silicon	NOUN
fuelectenerg-198	141	12	,	,	PUNCT
fuelectenerg-198	141	13	if	if	PROPN
fuelectenerg-198	141	14	is	be	AUX
fuelectenerg-198	141	15	the	the	DET
fuelectenerg-198	141	16	relative	relative	ADJ
fuelectenerg-198	141	17	permittivity	permittivity	NOUN
fuelectenerg-198	141	18	of	of	ADP
fuelectenerg-198	141	19	the	the	DET
fuelectenerg-198	141	20	interfacial	interfacial	ADJ
fuelectenerg-198	141	21	layer	layer	NOUN
fuelectenerg-198	141	22	,	,	PUNCT
fuelectenerg-198	141	23	n0	n0	PROPN
fuelectenerg-198	141	24	is	be	AUX
fuelectenerg-198	141	25	the	the	DET
fuelectenerg-198	141	26	density	density	NOUN
fuelectenerg-198	141	27	of	of	ADP
fuelectenerg-198	141	28	electrons	electron	NOUN
fuelectenerg-198	141	29	in	in	ADP
fuelectenerg-198	141	30	n	n	CCONJ
fuelectenerg-198	141	31	-	-	PUNCT
fuelectenerg-198	141	32	type	type	NOUN
fuelectenerg-198	141	33	silicon	silicon	NOUN
fuelectenerg-198	141	34	,	,	PUNCT
fuelectenerg-198	141	35	p0	p0	PROPN
fuelectenerg-198	141	36	is	be	AUX
fuelectenerg-198	141	37	the	the	DET
fuelectenerg-198	141	38	majority	majority	NOUN
fuelectenerg-198	141	39	carrier	carrier	NOUN
fuelectenerg-198	141	40	density	density	NOUN
fuelectenerg-198	141	41	in	in	ADP
fuelectenerg-198	141	42	p	p	NOUN
fuelectenerg-198	141	43	-	-	PUNCT
fuelectenerg-198	141	44	type	type	NOUN
fuelectenerg-198	141	45	silicon	silicon	NOUN
fuelectenerg-198	141	46	and	and	CCONJ
fuelectenerg-198	141	47	ni	ni	PROPN
fuelectenerg-198	141	48	is	be	AUX
fuelectenerg-198	141	49	the	the	DET
fuelectenerg-198	141	50	intrinsic	intrinsic	ADJ
fuelectenerg-198	141	51	carrier	carrier	NOUN
fuelectenerg-198	141	52	density	density	NOUN
fuelectenerg-198	141	53	in	in	ADP
fuelectenerg-198	141	54	silicon	silicon	NOUN
fuelectenerg-198	141	55	.	.	PUNCT
fuelectenerg-198	142	1	in	in	ADP
fuelectenerg-198	142	2	strong	strong	ADJ
fuelectenerg-198	142	3	inversion	inversion	NOUN
fuelectenerg-198	142	4	(	(	PUNCT
fuelectenerg-198	142	5	positive	positive	ADJ
fuelectenerg-198	142	6	gate	gate	NOUN
fuelectenerg-198	142	7	for	for	ADP
fuelectenerg-198	142	8	p	p	NOUN
fuelectenerg-198	142	9	-	-	PUNCT
fuelectenerg-198	142	10	type	type	NOUN
fuelectenerg-198	142	11	substrate	substrate	NOUN
fuelectenerg-198	142	12	,	,	PUNCT
fuelectenerg-198	142	13	negative	negative	ADJ
fuelectenerg-198	142	14	gate	gate	NOUN
fuelectenerg-198	142	15	for	for	ADP
fuelectenerg-198	142	16	n	n	CCONJ
fuelectenerg-198	142	17	-	-	PUNCT
fuelectenerg-198	142	18	type	type	NOUN
fuelectenerg-198	142	19	substrate	substrate	NOUN
fuelectenerg-198	142	20	)	)	PUNCT
fuelectenerg-198	142	21	the	the	DET
fuelectenerg-198	142	22	leakage	leakage	NOUN
fuelectenerg-198	142	23	current	current	ADJ
fuelectenerg-198	142	24	density	density	NOUN
fuelectenerg-198	142	25	reaches	reach	VERB
fuelectenerg-198	142	26	an	an	DET
fuelectenerg-198	142	27	almost	almost	ADV
fuelectenerg-198	142	28	saturated	saturate	VERB
fuelectenerg-198	142	29	value	value	NOUN
fuelectenerg-198	142	30	of	of	ADP
fuelectenerg-198	142	31	the	the	DET
fuelectenerg-198	142	32	order	order	NOUN
fuelectenerg-198	142	33	of	of	ADP
fuelectenerg-198	142	34	magnitude	magnitude	NOUN
fuelectenerg-198	142	35	1	1	NUM
fuelectenerg-198	142	36	ma	ma	PROPN
fuelectenerg-198	142	37	/	/	SYM
fuelectenerg-198	142	38	cm	cm	PROPN
fuelectenerg-198	142	39	2	2	NUM
fuelectenerg-198	142	40	.	.	PUNCT
fuelectenerg-198	143	1	this	this	DET
fuelectenerg-198	143	2	saturation	saturation	NOUN
fuelectenerg-198	143	3	is	be	AUX
fuelectenerg-198	143	4	due	due	ADJ
fuelectenerg-198	143	5	to	to	ADP
fuelectenerg-198	143	6	the	the	DET
fuelectenerg-198	143	7	exhaustion	exhaustion	NOUN
fuelectenerg-198	143	8	of	of	ADP
fuelectenerg-198	143	9	the	the	DET
fuelectenerg-198	143	10	minority	minority	NOUN
fuelectenerg-198	143	11	carriers	carrier	NOUN
fuelectenerg-198	143	12	in	in	ADP
fuelectenerg-198	143	13	the	the	DET
fuelectenerg-198	143	14	substrate	substrate	NOUN
fuelectenerg-198	143	15	,	,	PUNCT
fuelectenerg-198	143	16	due	due	ADP
fuelectenerg-198	143	17	to	to	ADP
fuelectenerg-198	143	18	the	the	DET
fuelectenerg-198	143	19	minority	minority	NOUN
fuelectenerg-198	143	20	carrier	carrier	NOUN
fuelectenerg-198	143	21	extraction	extraction	NOUN
fuelectenerg-198	143	22	from	from	ADP
fuelectenerg-198	143	23	the	the	DET
fuelectenerg-198	143	24	substrate	substrate	NOUN
fuelectenerg-198	143	25	(	(	PUNCT
fuelectenerg-198	143	26	electrons	electron	NOUN
fuelectenerg-198	143	27	for	for	ADP
fuelectenerg-198	143	28	p	p	NOUN
fuelectenerg-198	143	29	-	-	PUNCT
fuelectenerg-198	143	30	type	type	NOUN
fuelectenerg-198	143	31	and	and	CCONJ
fuelectenerg-198	143	32	holes	hole	NOUN
fuelectenerg-198	143	33	for	for	ADP
fuelectenerg-198	143	34	n	n	NOUN
fuelectenerg-198	143	35	-	-	PUNCT
fuelectenerg-198	143	36	type	type	NOUN
fuelectenerg-198	143	37	)	)	PUNCT
fuelectenerg-198	143	38	.	.	PUNCT
fuelectenerg-198	144	1	namely	namely	ADV
fuelectenerg-198	144	2	,	,	PUNCT
fuelectenerg-198	144	3	the	the	DET
fuelectenerg-198	144	4	maximum	maximum	ADJ
fuelectenerg-198	144	5	tunneling	tunneling	ADJ
fuelectenerg-198	144	6	current	current	ADJ
fuelectenerg-198	144	7	density	density	NOUN
fuelectenerg-198	144	8	of	of	ADP
fuelectenerg-198	144	9	the	the	DET
fuelectenerg-198	144	10	electrons	electron	NOUN
fuelectenerg-198	144	11	from	from	ADP
fuelectenerg-198	144	12	the	the	DET
fuelectenerg-198	144	13	substrate	substrate	NOUN
fuelectenerg-198	144	14	is	be	AUX
fuelectenerg-198	144	15	limited	limit	VERB
fuelectenerg-198	144	16	by	by	ADP
fuelectenerg-198	144	17	the	the	DET
fuelectenerg-198	144	18	thermal	thermal	ADJ
fuelectenerg-198	144	19	generation	generation	NOUN
fuelectenerg-198	144	20	rate	rate	NOUN
fuelectenerg-198	144	21	of	of	ADP
fuelectenerg-198	144	22	electrons	electron	NOUN
fuelectenerg-198	144	23	in	in	ADP
fuelectenerg-198	144	24	the	the	DET
fuelectenerg-198	144	25	inversion	inversion	NOUN
fuelectenerg-198	144	26	region	region	NOUN
fuelectenerg-198	144	27	of	of	ADP
fuelectenerg-198	144	28	si	si	X
fuelectenerg-198	144	29	,	,	PUNCT
fuelectenerg-198	144	30	similarly	similarly	ADV
fuelectenerg-198	144	31	to	to	ADP
fuelectenerg-198	144	32	the	the	DET
fuelectenerg-198	144	33	case	case	NOUN
fuelectenerg-198	144	34	of	of	ADP
fuelectenerg-198	144	35	the	the	DET
fuelectenerg-198	144	36	diode	diode	NOUN
fuelectenerg-198	144	37	reverse	reverse	NOUN
fuelectenerg-198	144	38	current	current	ADJ
fuelectenerg-198	144	39	.	.	PUNCT
fuelectenerg-198	145	1	the	the	DET
fuelectenerg-198	145	2	values	value	NOUN
fuelectenerg-198	145	3	observed	observe	VERB
fuelectenerg-198	145	4	in	in	ADP
fuelectenerg-198	145	5	our	our	PRON
fuelectenerg-198	145	6	experiment	experiment	NOUN
fuelectenerg-198	145	7	are	be	AUX
fuelectenerg-198	145	8	comparable	comparable	ADJ
fuelectenerg-198	145	9	to	to	ADP
fuelectenerg-198	145	10	the	the	DET
fuelectenerg-198	145	11	values	value	NOUN
fuelectenerg-198	145	12	obtained	obtain	VERB
fuelectenerg-198	145	13	for	for	ADP
fuelectenerg-198	145	14	p	p	PROPN
fuelectenerg-198	145	15	-	-	PUNCT
fuelectenerg-198	145	16	n	n	CCONJ
fuelectenerg-198	145	17	si	si	X
fuelectenerg-198	145	18	diode	diode	NOUN
fuelectenerg-198	145	19	reverse	reverse	ADJ
fuelectenerg-198	145	20	currents	current	NOUN
fuelectenerg-198	145	21	for	for	ADP
fuelectenerg-198	145	22	the	the	DET
fuelectenerg-198	145	23	voltages	voltage	NOUN
fuelectenerg-198	145	24	between	between	ADP
fuelectenerg-198	145	25	1	1	NUM
fuelectenerg-198	145	26	v	v	NOUN
fuelectenerg-198	145	27	and	and	CCONJ
fuelectenerg-198	145	28	10	10	NUM
fuelectenerg-198	145	29	v.	v.	ADP
fuelectenerg-198	145	30	2.3	2.3	NUM
fuelectenerg-198	145	31	.	.	PUNCT
fuelectenerg-198	146	1	equivalent	equivalent	ADJ
fuelectenerg-198	146	2	circuit	circuit	NOUN
fuelectenerg-198	146	3	combining	combine	VERB
fuelectenerg-198	146	4	above	above	ADP
fuelectenerg-198	146	5	described	describe	VERB
fuelectenerg-198	146	6	model	model	NOUN
fuelectenerg-198	146	7	with	with	ADP
fuelectenerg-198	146	8	the	the	DET
fuelectenerg-198	146	9	standard	standard	ADJ
fuelectenerg-198	146	10	description	description	NOUN
fuelectenerg-198	146	11	of	of	ADP
fuelectenerg-198	146	12	mis	mis	PROPN
fuelectenerg-198	146	13	structures	structure	NOUN
fuelectenerg-198	146	14	[	[	X
fuelectenerg-198	146	15	51	51	NUM
fuelectenerg-198	146	16	]	]	PUNCT
fuelectenerg-198	146	17	,	,	PUNCT
fuelectenerg-198	146	18	a	a	DET
fuelectenerg-198	146	19	complete	complete	ADJ
fuelectenerg-198	146	20	equivalent	equivalent	ADJ
fuelectenerg-198	146	21	circuit	circuit	NOUN
fuelectenerg-198	146	22	of	of	ADP
fuelectenerg-198	146	23	the	the	DET
fuelectenerg-198	146	24	considered	consider	VERB
fuelectenerg-198	146	25	structure	structure	NOUN
fuelectenerg-198	146	26	can	can	AUX
fuelectenerg-198	146	27	be	be	AUX
fuelectenerg-198	146	28	constructed	construct	VERB
fuelectenerg-198	146	29	(	(	PUNCT
fuelectenerg-198	146	30	fig	fig	NOUN
fuelectenerg-198	146	31	.	.	PUNCT
fuelectenerg-198	147	1	5	5	NUM
fuelectenerg-198	147	2	)	)	PUNCT
fuelectenerg-198	147	3	.	.	PUNCT
fuelectenerg-198	148	1	diode	diode	NOUN
fuelectenerg-198	148	2	(	(	PUNCT
fuelectenerg-198	148	3	d	d	NOUN
fuelectenerg-198	148	4	)	)	PUNCT
fuelectenerg-198	148	5	that	that	PRON
fuelectenerg-198	148	6	is	be	AUX
fuelectenerg-198	148	7	shown	show	VERB
fuelectenerg-198	148	8	at	at	ADP
fuelectenerg-198	148	9	the	the	DET
fuelectenerg-198	148	10	left	left	ADJ
fuelectenerg-198	148	11	end	end	NOUN
fuelectenerg-198	148	12	of	of	ADP
fuelectenerg-198	148	13	the	the	DET
fuelectenerg-198	148	14	figure	figure	NOUN
fuelectenerg-198	148	15	accounts	account	VERB
fuelectenerg-198	148	16	for	for	ADP
fuelectenerg-198	148	17	the	the	DET
fuelectenerg-198	148	18	effect	effect	NOUN
fuelectenerg-198	148	19	of	of	ADP
fuelectenerg-198	148	20	exhaustion	exhaustion	NOUN
fuelectenerg-198	148	21	of	of	ADP
fuelectenerg-198	148	22	minority	minority	NOUN
fuelectenerg-198	148	23	carrier	carrier	NOUN
fuelectenerg-198	148	24	in	in	ADP
fuelectenerg-198	148	25	strong	strong	ADJ
fuelectenerg-198	148	26	accumulation	accumulation	NOUN
fuelectenerg-198	148	27	,	,	PUNCT
fuelectenerg-198	148	28	as	as	SCONJ
fuelectenerg-198	148	29	described	describe	VERB
fuelectenerg-198	148	30	above	above	ADV
fuelectenerg-198	148	31	.	.	PUNCT
fuelectenerg-198	149	1	diode	diode	NOUN
fuelectenerg-198	149	2	orientation	orientation	NOUN
fuelectenerg-198	149	3	shown	show	VERB
fuelectenerg-198	149	4	in	in	ADP
fuelectenerg-198	149	5	the	the	DET
fuelectenerg-198	149	6	figure	figure	NOUN
fuelectenerg-198	149	7	corresponds	correspond	VERB
fuelectenerg-198	149	8	to	to	ADP
fuelectenerg-198	149	9	an	an	DET
fuelectenerg-198	149	10	n	n	CCONJ
fuelectenerg-198	149	11	-	-	PUNCT
fuelectenerg-198	149	12	type	type	NOUN
fuelectenerg-198	149	13	substrate	substrate	NOUN
fuelectenerg-198	149	14	;	;	PUNCT
fuelectenerg-198	149	15	for	for	ADP
fuelectenerg-198	149	16	the	the	DET
fuelectenerg-198	149	17	case	case	NOUN
fuelectenerg-198	149	18	of	of	ADP
fuelectenerg-198	149	19	p	p	NOUN
fuelectenerg-198	149	20	-	-	PUNCT
fuelectenerg-198	149	21	type	type	NOUN
fuelectenerg-198	149	22	si	si	NOUN
fuelectenerg-198	149	23	substrate	substrate	NOUN
fuelectenerg-198	149	24	the	the	DET
fuelectenerg-198	149	25	orientation	orientation	NOUN
fuelectenerg-198	149	26	is	be	AUX
fuelectenerg-198	149	27	reversed	reverse	VERB
fuelectenerg-198	149	28	.	.	PUNCT
fuelectenerg-198	150	1	physical	physical	ADJ
fuelectenerg-198	150	2	modeling	modeling	NOUN
fuelectenerg-198	150	3	of	of	ADP
fuelectenerg-198	150	4	ta2o5	ta2o5	PROPN
fuelectenerg-198	150	5	based	base	VERB
fuelectenerg-198	150	6	mos	mos	PROPN
fuelectenerg-198	150	7	capacitors	capacitor	NOUN
fuelectenerg-198	150	8	on	on	ADP
fuelectenerg-198	150	9	si	si	PROPN
fuelectenerg-198	150	10	267	267	NUM
fuelectenerg-198	150	11	fig	fig	NOUN
fuelectenerg-198	150	12	.	.	PUNCT
fuelectenerg-198	151	1	5	5	NUM
fuelectenerg-198	151	2	equivalent	equivalent	ADJ
fuelectenerg-198	151	3	circuit	circuit	NOUN
fuelectenerg-198	151	4	of	of	ADP
fuelectenerg-198	151	5	the	the	DET
fuelectenerg-198	151	6	considered	consider	VERB
fuelectenerg-198	151	7	structure	structure	NOUN
fuelectenerg-198	151	8	meanings	meaning	NOUN
fuelectenerg-198	151	9	of	of	ADP
fuelectenerg-198	151	10	the	the	DET
fuelectenerg-198	151	11	symbols	symbol	NOUN
fuelectenerg-198	151	12	for	for	ADP
fuelectenerg-198	151	13	physical	physical	ADJ
fuelectenerg-198	151	14	quantities	quantity	NOUN
fuelectenerg-198	151	15	in	in	ADP
fuelectenerg-198	151	16	fig	fig	NOUN
fuelectenerg-198	151	17	.	.	PUNCT
fuelectenerg-198	152	1	5	5	NUM
fuelectenerg-198	152	2	are	be	AUX
fuelectenerg-198	152	3	as	as	SCONJ
fuelectenerg-198	152	4	follows	follow	VERB
fuelectenerg-198	152	5	:	:	PUNCT
fuelectenerg-198	152	6	rl	rl	X
fuelectenerg-198	152	7	–	–	PUNCT
fuelectenerg-198	152	8	serial	serial	ADJ
fuelectenerg-198	152	9	resistance	resistance	NOUN
fuelectenerg-198	152	10	,	,	PUNCT
fuelectenerg-198	152	11	rhk	rhk	VERB
fuelectenerg-198	152	12	–	–	PUNCT
fuelectenerg-198	152	13	voltage	voltage	NOUN
fuelectenerg-198	152	14	dependent	dependent	ADJ
fuelectenerg-198	152	15	resistance	resistance	NOUN
fuelectenerg-198	152	16	of	of	ADP
fuelectenerg-198	152	17	the	the	DET
fuelectenerg-198	152	18	high	high	ADJ
fuelectenerg-198	152	19	-	-	PUNCT
fuelectenerg-198	152	20	k	k	NOUN
fuelectenerg-198	152	21	layer	layer	NOUN
fuelectenerg-198	152	22	,	,	PUNCT
fuelectenerg-198	152	23	rif	rif	PROPN
fuelectenerg-198	152	24	–	–	PUNCT
fuelectenerg-198	152	25	voltage	voltage	NOUN
fuelectenerg-198	152	26	dependent	dependent	ADJ
fuelectenerg-198	152	27	resistance	resistance	NOUN
fuelectenerg-198	152	28	of	of	ADP
fuelectenerg-198	152	29	the	the	DET
fuelectenerg-198	152	30	interfacial	interfacial	ADJ
fuelectenerg-198	152	31	layer	layer	NOUN
fuelectenerg-198	152	32	,	,	PUNCT
fuelectenerg-198	152	33	rit	rit	NOUN
fuelectenerg-198	152	34	–	–	PUNCT
fuelectenerg-198	152	35	interface	interface	NOUN
fuelectenerg-198	152	36	traps	trap	NOUN
fuelectenerg-198	152	37	resistance	resistance	NOUN
fuelectenerg-198	152	38	,	,	PUNCT
fuelectenerg-198	152	39	chk	chk	INTJ
fuelectenerg-198	152	40	–	–	PUNCT
fuelectenerg-198	152	41	capacitance	capacitance	NOUN
fuelectenerg-198	152	42	of	of	ADP
fuelectenerg-198	152	43	the	the	DET
fuelectenerg-198	152	44	high	high	ADJ
fuelectenerg-198	152	45	-	-	PUNCT
fuelectenerg-198	152	46	k	k	NOUN
fuelectenerg-198	152	47	layer	layer	NOUN
fuelectenerg-198	152	48	,	,	PUNCT
fuelectenerg-198	152	49	cif	cif	PROPN
fuelectenerg-198	152	50	–	–	PUNCT
fuelectenerg-198	152	51	capacitance	capacitance	NOUN
fuelectenerg-198	152	52	of	of	ADP
fuelectenerg-198	152	53	the	the	DET
fuelectenerg-198	152	54	interfacial	interfacial	ADJ
fuelectenerg-198	152	55	layer	layer	NOUN
fuelectenerg-198	152	56	and	and	CCONJ
fuelectenerg-198	152	57	cit	cit	PROPN
fuelectenerg-198	152	58	–	–	PUNCT
fuelectenerg-198	152	59	interface	interface	NOUN
fuelectenerg-198	152	60	traps	trap	NOUN
fuelectenerg-198	152	61	capacitance	capacitance	NOUN
fuelectenerg-198	152	62	.	.	PUNCT
fuelectenerg-198	153	1	capacitances	capacitance	NOUN
fuelectenerg-198	153	2	of	of	ADP
fuelectenerg-198	153	3	the	the	DET
fuelectenerg-198	153	4	layers	layer	NOUN
fuelectenerg-198	153	5	of	of	ADP
fuelectenerg-198	153	6	the	the	DET
fuelectenerg-198	153	7	dielectric	dielectric	ADJ
fuelectenerg-198	153	8	stack	stack	NOUN
fuelectenerg-198	153	9	are	be	AUX
fuelectenerg-198	153	10	given	give	VERB
fuelectenerg-198	153	11	by	by	ADP
fuelectenerg-198	153	12	following	follow	VERB
fuelectenerg-198	153	13	expressions	expression	NOUN
fuelectenerg-198	153	14	:	:	PUNCT
fuelectenerg-198	153	15	hk	hk	PROPN
fuelectenerg-198	153	16	0hkhk	0hkhk	PROPN
fuelectenerg-198	154	1	d	d	X
fuelectenerg-198	154	2	a	a	DET
fuelectenerg-198	154	3	c	c	NOUN
fuelectenerg-198	154	4			NOUN
fuelectenerg-198	154	5	(	(	PUNCT
fuelectenerg-198	154	6	12	12	NUM
fuelectenerg-198	154	7	)	)	PUNCT
fuelectenerg-198	154	8	and	and	CCONJ
fuelectenerg-198	154	9	if	if	SCONJ
fuelectenerg-198	154	10	0ifif	0ifif	PROPN
fuelectenerg-198	154	11	d	d	X
fuelectenerg-198	154	12	a	a	DET
fuelectenerg-198	154	13	c	c	NOUN
fuelectenerg-198	154	14			NOUN
fuelectenerg-198	154	15	,	,	PUNCT
fuelectenerg-198	154	16	(	(	PUNCT
fuelectenerg-198	154	17	13	13	NUM
fuelectenerg-198	154	18	)	)	PUNCT
fuelectenerg-198	154	19	where	where	SCONJ
fuelectenerg-198	154	20	hk	hk	PROPN
fuelectenerg-198	154	21	is	be	AUX
fuelectenerg-198	154	22	the	the	DET
fuelectenerg-198	154	23	the	the	DET
fuelectenerg-198	154	24	relative	relative	ADJ
fuelectenerg-198	154	25	permittivity	permittivity	NOUN
fuelectenerg-198	154	26	of	of	ADP
fuelectenerg-198	154	27	high	high	ADJ
fuelectenerg-198	154	28	-	-	PUNCT
fuelectenerg-198	154	29	k	k	NOUN
fuelectenerg-198	154	30	layer	layer	NOUN
fuelectenerg-198	154	31	and	and	CCONJ
fuelectenerg-198	154	32	a	a	PRON
fuelectenerg-198	154	33	is	be	AUX
fuelectenerg-198	154	34	the	the	DET
fuelectenerg-198	154	35	electrode	electrode	ADJ
fuelectenerg-198	154	36	area	area	NOUN
fuelectenerg-198	154	37	of	of	ADP
fuelectenerg-198	154	38	the	the	DET
fuelectenerg-198	154	39	capacitor	capacitor	NOUN
fuelectenerg-198	154	40	.	.	PUNCT
fuelectenerg-198	155	1	rl	rl	PROPN
fuelectenerg-198	155	2	,	,	PUNCT
fuelectenerg-198	155	3	rit	rit	PROPN
fuelectenerg-198	155	4	,	,	PUNCT
fuelectenerg-198	155	5	cif	cif	PROPN
fuelectenerg-198	155	6	and	and	CCONJ
fuelectenerg-198	155	7	cit	cit	PROPN
fuelectenerg-198	155	8	are	be	AUX
fuelectenerg-198	155	9	to	to	PART
fuelectenerg-198	155	10	be	be	AUX
fuelectenerg-198	155	11	extracted	extract	VERB
fuelectenerg-198	155	12	from	from	ADP
fuelectenerg-198	155	13	the	the	DET
fuelectenerg-198	155	14	c	c	PROPN
fuelectenerg-198	155	15	-	-	PUNCT
fuelectenerg-198	155	16	g	g	NOUN
fuelectenerg-198	155	17	-	-	PUNCT
fuelectenerg-198	155	18	v	v	NOUN
fuelectenerg-198	155	19	curves	curve	NOUN
fuelectenerg-198	155	20	at	at	ADP
fuelectenerg-198	155	21	various	various	ADJ
fuelectenerg-198	155	22	frequencies	frequency	NOUN
fuelectenerg-198	155	23	,	,	PUNCT
fuelectenerg-198	155	24	while	while	SCONJ
fuelectenerg-198	155	25	rhk	rhk	PROPN
fuelectenerg-198	155	26	and	and	CCONJ
fuelectenerg-198	155	27	rif	rif	VERB
fuelectenerg-198	155	28	from	from	ADP
fuelectenerg-198	155	29	i	i	PROPN
fuelectenerg-198	155	30	-	-	PUNCT
fuelectenerg-198	155	31	v	v	NOUN
fuelectenerg-198	155	32	curves	curve	NOUN
fuelectenerg-198	155	33	while	while	SCONJ
fuelectenerg-198	155	34	using	use	VERB
fuelectenerg-198	155	35	here	here	ADV
fuelectenerg-198	155	36	described	describe	VERB
fuelectenerg-198	155	37	model	model	NOUN
fuelectenerg-198	155	38	.	.	PUNCT
fuelectenerg-198	156	1	rhk	rhk	VERB
fuelectenerg-198	156	2	and	and	CCONJ
fuelectenerg-198	156	3	rif	rif	PROPN
fuelectenerg-198	156	4	are	be	AUX
fuelectenerg-198	156	5	both	both	PRON
fuelectenerg-198	156	6	voltage	voltage	NOUN
fuelectenerg-198	156	7	dependent	dependent	ADJ
fuelectenerg-198	156	8	.	.	PUNCT
fuelectenerg-198	157	1	3	3	X
fuelectenerg-198	157	2	.	.	X
fuelectenerg-198	157	3	results	result	VERB
fuelectenerg-198	157	4	3.1	3.1	NUM
fuelectenerg-198	157	5	.	.	PUNCT
fuelectenerg-198	158	1	i	i	PROPN
fuelectenerg-198	158	2	-	-	PUNCT
fuelectenerg-198	158	3	v	v	NOUN
fuelectenerg-198	158	4	curves	curve	NOUN
fuelectenerg-198	158	5	first	first	ADV
fuelectenerg-198	158	6	we	we	PRON
fuelectenerg-198	158	7	discuss	discuss	VERB
fuelectenerg-198	158	8	the	the	DET
fuelectenerg-198	158	9	values	value	NOUN
fuelectenerg-198	158	10	of	of	ADP
fuelectenerg-198	158	11	the	the	DET
fuelectenerg-198	158	12	parameters	parameter	NOUN
fuelectenerg-198	158	13	obtained	obtain	VERB
fuelectenerg-198	158	14	from	from	ADP
fuelectenerg-198	158	15	the	the	DET
fuelectenerg-198	158	16	fitting	fitting	NOUN
fuelectenerg-198	158	17	of	of	ADP
fuelectenerg-198	158	18	the	the	DET
fuelectenerg-198	158	19	theoretical	theoretical	NOUN
fuelectenerg-198	158	20	to	to	ADP
fuelectenerg-198	158	21	the	the	DET
fuelectenerg-198	158	22	experimental	experimental	ADJ
fuelectenerg-198	158	23	curve	curve	NOUN
fuelectenerg-198	158	24	that	that	PRON
fuelectenerg-198	158	25	can	can	AUX
fuelectenerg-198	158	26	be	be	AUX
fuelectenerg-198	158	27	obtained	obtain	VERB
fuelectenerg-198	158	28	by	by	ADP
fuelectenerg-198	158	29	independent	independent	ADJ
fuelectenerg-198	158	30	methods	method	NOUN
fuelectenerg-198	158	31	.	.	PUNCT
fuelectenerg-198	159	1	this	this	PRON
fuelectenerg-198	159	2	is	be	AUX
fuelectenerg-198	159	3	the	the	DET
fuelectenerg-198	159	4	case	case	NOUN
fuelectenerg-198	159	5	with	with	ADP
fuelectenerg-198	159	6	the	the	DET
fuelectenerg-198	159	7	interfacial	interfacial	ADJ
fuelectenerg-198	159	8	layer	layer	NOUN
fuelectenerg-198	159	9	thickness	thickness	NOUN
fuelectenerg-198	159	10	(	(	PUNCT
fuelectenerg-198	159	11	dif	dif	X
fuelectenerg-198	159	12	)	)	PUNCT
fuelectenerg-198	159	13	and	and	CCONJ
fuelectenerg-198	159	14	the	the	DET
fuelectenerg-198	159	15	band	band	NOUN
fuelectenerg-198	159	16	offsets	offset	NOUN
fuelectenerg-198	159	17	(	(	PUNCT
fuelectenerg-198	159	18	e	e	NUM
fuelectenerg-198	159	19	and	and	CCONJ
fuelectenerg-198	159	20	h	h	NUM
fuelectenerg-198	159	21	)	)	PUNCT
fuelectenerg-198	159	22	at	at	ADP
fuelectenerg-198	159	23	the	the	DET
fuelectenerg-198	159	24	contact	contact	NOUN
fuelectenerg-198	159	25	between	between	ADP
fuelectenerg-198	159	26	si	si	PROPN
fuelectenerg-198	159	27	and	and	CCONJ
fuelectenerg-198	159	28	sio2	sio2	PROPN
fuelectenerg-198	159	29	.	.	PUNCT
fuelectenerg-198	160	1	for	for	ADP
fuelectenerg-198	160	2	e	e	NUM
fuelectenerg-198	160	3	and	and	CCONJ
fuelectenerg-198	160	4	h	h	NUM
fuelectenerg-198	160	5	values	value	NOUN
fuelectenerg-198	160	6	close	close	ADV
fuelectenerg-198	160	7	to	to	ADP
fuelectenerg-198	160	8	the	the	DET
fuelectenerg-198	160	9	literature	literature	NOUN
fuelectenerg-198	160	10	data	data	PROPN
fuelectenerg-198	160	11	,	,	PUNCT
fuelectenerg-198	160	12	3.15	3.15	NUM
fuelectenerg-198	160	13	ev	ev	NOUN
fuelectenerg-198	160	14	and	and	CCONJ
fuelectenerg-198	160	15	4.70	4.70	NUM
fuelectenerg-198	160	16	ev	ev	NOUN
fuelectenerg-198	160	17	,	,	PUNCT
fuelectenerg-198	160	18	respectively	respectively	ADV
fuelectenerg-198	160	19	,	,	PUNCT
fuelectenerg-198	160	20	have	have	AUX
fuelectenerg-198	160	21	been	be	AUX
fuelectenerg-198	160	22	obtained	obtain	VERB
fuelectenerg-198	160	23	[	[	X
fuelectenerg-198	160	24	44	44	NUM
fuelectenerg-198	160	25	]	]	PUNCT
fuelectenerg-198	160	26	.	.	PUNCT
fuelectenerg-198	161	1	in	in	ADP
fuelectenerg-198	161	2	[	[	X
fuelectenerg-198	161	3	44	44	NUM
fuelectenerg-198	161	4	]	]	PUNCT
fuelectenerg-198	161	5	,	,	PUNCT
fuelectenerg-198	161	6	fitted	fit	VERB
fuelectenerg-198	161	7	value	value	NOUN
fuelectenerg-198	161	8	dif	dif	X
fuelectenerg-198	161	9	=	=	SYM
fuelectenerg-198	161	10	2.8	2.8	NUM
fuelectenerg-198	161	11	nm	nm	NOUN
fuelectenerg-198	161	12	was	be	AUX
fuelectenerg-198	161	13	obtained	obtain	VERB
fuelectenerg-198	161	14	,	,	PUNCT
fuelectenerg-198	161	15	close	close	ADJ
fuelectenerg-198	161	16	to	to	ADP
fuelectenerg-198	161	17	the	the	DET
fuelectenerg-198	161	18	value	value	NOUN
fuelectenerg-198	161	19	of	of	ADP
fuelectenerg-198	161	20	2.6	2.6	NUM
fuelectenerg-198	161	21	nm	nm	NOUN
fuelectenerg-198	161	22	measured	measure	VERB
fuelectenerg-198	161	23	by	by	ADP
fuelectenerg-198	161	24	transmission	transmission	NOUN
fuelectenerg-198	161	25	electron	electron	NOUN
fuelectenerg-198	161	26	microscopy	microscopy	NOUN
fuelectenerg-198	161	27	.	.	PUNCT
fuelectenerg-198	162	1	some	some	PRON
fuelectenerg-198	162	2	of	of	ADP
fuelectenerg-198	162	3	the	the	DET
fuelectenerg-198	162	4	results	result	NOUN
fuelectenerg-198	162	5	obtained	obtain	VERB
fuelectenerg-198	162	6	from	from	ADP
fuelectenerg-198	162	7	applying	apply	VERB
fuelectenerg-198	162	8	the	the	DET
fuelectenerg-198	162	9	model	model	NOUN
fuelectenerg-198	162	10	on	on	ADP
fuelectenerg-198	162	11	the	the	DET
fuelectenerg-198	162	12	experimental	experimental	ADJ
fuelectenerg-198	162	13	results	result	NOUN
fuelectenerg-198	162	14	for	for	ADP
fuelectenerg-198	162	15	i	i	PROPN
fuelectenerg-198	162	16	-	-	PUNCT
fuelectenerg-198	162	17	v	v	NOUN
fuelectenerg-198	162	18	curves	curve	NOUN
fuelectenerg-198	162	19	different	different	ADJ
fuelectenerg-198	162	20	for	for	ADP
fuelectenerg-198	162	21	al	al	PROPN
fuelectenerg-198	162	22	-	-	PUNCT
fuelectenerg-198	162	23	high	high	ADJ
fuelectenerg-198	162	24	-	-	PUNCT
fuelectenerg-198	162	25	k	k	NOUN
fuelectenerg-198	162	26	/	/	SYM
fuelectenerg-198	162	27	sioxny	sioxny	PROPN
fuelectenerg-198	162	28	-	-	PUNCT
fuelectenerg-198	162	29	si	si	PROPN
fuelectenerg-198	162	30	structures	structure	NOUN
fuelectenerg-198	162	31	are	be	AUX
fuelectenerg-198	162	32	displayed	display	VERB
fuelectenerg-198	162	33	in	in	ADP
fuelectenerg-198	162	34	table	table	NOUN
fuelectenerg-198	162	35	2	2	NUM
fuelectenerg-198	162	36	.	.	PUNCT
fuelectenerg-198	163	1	several	several	ADJ
fuelectenerg-198	163	2	chk	chk	PROPN
fuelectenerg-198	163	3	cif	cif	PROPN
fuelectenerg-198	163	4	rhk	rhk	PROPN
fuelectenerg-198	163	5	rif	rif	PROPN
fuelectenerg-198	163	6	rl	rl	PROPN
fuelectenerg-198	163	7	rit	rit	PROPN
fuelectenerg-198	163	8	cit	cit	PROPN
fuelectenerg-198	163	9	gate	gate	PROPN
fuelectenerg-198	163	10	substrate	substrate	NOUN
fuelectenerg-198	163	11	d	d	PROPN
fuelectenerg-198	163	12	u	u	NOUN
fuelectenerg-198	163	13	u	u	PROPN
fuelectenerg-198	163	14	cs	cs	PROPN
fuelectenerg-198	163	15	268	268	NUM
fuelectenerg-198	163	16	n.	n.	NOUN
fuelectenerg-198	163	17	novkovski	novkovski	PROPN
fuelectenerg-198	163	18	important	important	ADJ
fuelectenerg-198	163	19	features	feature	NOUN
fuelectenerg-198	163	20	of	of	ADP
fuelectenerg-198	163	21	the	the	DET
fuelectenerg-198	163	22	structures	structure	NOUN
fuelectenerg-198	163	23	are	be	AUX
fuelectenerg-198	163	24	clearly	clearly	ADV
fuelectenerg-198	163	25	identified	identify	VERB
fuelectenerg-198	163	26	by	by	ADP
fuelectenerg-198	163	27	the	the	DET
fuelectenerg-198	163	28	values	value	NOUN
fuelectenerg-198	163	29	of	of	ADP
fuelectenerg-198	163	30	the	the	DET
fuelectenerg-198	163	31	important	important	ADJ
fuelectenerg-198	163	32	parameters	parameter	NOUN
fuelectenerg-198	163	33	.	.	PUNCT
fuelectenerg-198	164	1	table	table	NOUN
fuelectenerg-198	164	2	2	2	NUM
fuelectenerg-198	164	3	values	value	NOUN
fuelectenerg-198	164	4	of	of	ADP
fuelectenerg-198	164	5	fitting	fitting	ADJ
fuelectenerg-198	164	6	parameters	parameter	NOUN
fuelectenerg-198	164	7	for	for	ADP
fuelectenerg-198	164	8	al	al	PROPN
fuelectenerg-198	164	9	-	-	PUNCT
fuelectenerg-198	164	10	high	high	ADJ
fuelectenerg-198	164	11	-	-	PUNCT
fuelectenerg-198	164	12	k	k	NOUN
fuelectenerg-198	164	13	/	/	SYM
fuelectenerg-198	164	14	sioxny	sioxny	PROPN
fuelectenerg-198	164	15	-	-	PUNCT
fuelectenerg-198	164	16	si	si	PROPN
fuelectenerg-198	164	17	structures	structures	PROPN
fuelectenerg-198	164	18	r.f	r.f	PROPN
fuelectenerg-198	164	19	.	.	PROPN
fuelectenerg-198	164	20	sputtered	sputter	VERB
fuelectenerg-198	164	21	ta2o5	ta2o5	PROPN
fuelectenerg-198	164	22	on	on	ADP
fuelectenerg-198	164	23	bare	bare	ADJ
fuelectenerg-198	164	24	si	si	NOUN
fuelectenerg-198	164	25	at	at	ADP
fuelectenerg-198	164	26	substrate	substrate	NOUN
fuelectenerg-198	164	27	temperature	temperature	NOUN
fuelectenerg-198	165	1	493	493	NUM
fuelectenerg-198	165	2	k	k	NOUN
fuelectenerg-198	165	3	(	(	PUNCT
fuelectenerg-198	165	4	unpublished	unpublished	ADJ
fuelectenerg-198	165	5	data)	data)	X
fuelectenerg-198	165	6	annealed	anneal	VERB
fuelectenerg-198	165	7	dif	dif	ADV
fuelectenerg-198	165	8	(	(	PUNCT
fuelectenerg-198	165	9	nm	nm	NOUN
fuelectenerg-198	165	10	)	)	PUNCT
fuelectenerg-198	165	11	dhk	dhk	PROPN
fuelectenerg-198	165	12	(	(	PUNCT
fuelectenerg-198	165	13	nm	nm	NOUN
fuelectenerg-198	165	14	)	)	PUNCT
fuelectenerg-198	165	15	e	e	NUM
fuelectenerg-198	165	16	(	(	PUNCT
fuelectenerg-198	165	17	ev	ev	NOUN
fuelectenerg-198	165	18	)	)	PUNCT
fuelectenerg-198	165	19	h	h	X
fuelectenerg-198	166	1	(	(	PUNCT
fuelectenerg-198	166	2	ev	ev	INTJ
fuelectenerg-198	166	3	)	)	PUNCT
fuelectenerg-198	166	4	hc	hc	PROPN
fuelectenerg-198	166	5	(	(	PUNCT
fuelectenerg-198	166	6			PROPN
fuelectenerg-198	166	7	-1cm-1)	-1cm-1)	PUNCT
fuelectenerg-198	166	8	hk(0	hk(0	NOUN
fuelectenerg-198	166	9	)	)	PUNCT
fuelectenerg-198	166	10	(	(	PUNCT
fuelectenerg-198	166	11	-1cm-1)	-1cm-1)	X
fuelectenerg-198	166	12	not	not	PART
fuelectenerg-198	166	13	2.90	2.90	NUM
fuelectenerg-198	166	14	27	27	NUM
fuelectenerg-198	166	15	2.50	2.50	NUM
fuelectenerg-198	166	16	3.30	3.30	NUM
fuelectenerg-198	166	17	110	110	NUM
fuelectenerg-198	166	18	-	-	SYM
fuelectenerg-198	166	19	16	16	NUM
fuelectenerg-198	166	20	3.9510	3.9510	NUM
fuelectenerg-198	166	21	-	-	SYM
fuelectenerg-198	166	22	17	17	NUM
fuelectenerg-198	166	23	at	at	ADP
fuelectenerg-198	166	24	893	893	NUM
fuelectenerg-198	166	25	k	k	NUM
fuelectenerg-198	166	26	2.95	2.95	NUM
fuelectenerg-198	166	27	27	27	NUM
fuelectenerg-198	166	28	3.05	3.05	NUM
fuelectenerg-198	166	29	3.40	3.40	NUM
fuelectenerg-198	166	30	110	110	NUM
fuelectenerg-198	166	31	-	-	SYM
fuelectenerg-198	166	32	16	16	NUM
fuelectenerg-198	166	33	3.9510	3.9510	NUM
fuelectenerg-198	166	34	-	-	SYM
fuelectenerg-198	166	35	15	15	NUM
fuelectenerg-198	166	36	at	at	ADP
fuelectenerg-198	166	37	1193	1193	NUM
fuelectenerg-198	166	38	k	k	PROPN
fuelectenerg-198	166	39	2.97	2.97	NUM
fuelectenerg-198	166	40	26	26	NUM
fuelectenerg-198	166	41	3.15	3.15	NUM
fuelectenerg-198	166	42	4.70	4.70	NUM
fuelectenerg-198	166	43	110	110	NUM
fuelectenerg-198	166	44	-	-	SYM
fuelectenerg-198	166	45	16	16	NUM
fuelectenerg-198	166	46	1.9810	1.9810	NUM
fuelectenerg-198	166	47	-	-	SYM
fuelectenerg-198	166	48	12	12	NUM
fuelectenerg-198	166	49	ta2o5	ta2o5	PROPN
fuelectenerg-198	166	50	obtained	obtain	VERB
fuelectenerg-198	166	51	by	by	ADP
fuelectenerg-198	166	52	thermal	thermal	ADJ
fuelectenerg-198	166	53	oxidation	oxidation	NOUN
fuelectenerg-198	166	54	of	of	ADP
fuelectenerg-198	166	55	ta	ta	PROPN
fuelectenerg-198	166	56	in	in	ADP
fuelectenerg-198	166	57	pure	pure	ADJ
fuelectenerg-198	166	58	o2	o2	PROPN
fuelectenerg-198	166	59	at	at	ADP
fuelectenerg-198	166	60	873	873	NUM
fuelectenerg-198	166	61	k	k	NOUN
fuelectenerg-198	166	62	on	on	ADP
fuelectenerg-198	166	63	bare	bare	ADJ
fuelectenerg-198	166	64	si	si	PROPN
fuelectenerg-198	167	1	[	[	X
fuelectenerg-198	167	2	44]	44]	PROPN
fuelectenerg-198	167	3	gate	gate	NOUN
fuelectenerg-198	167	4	dif	dif	ADV
fuelectenerg-198	167	5	(	(	PUNCT
fuelectenerg-198	167	6	nm	nm	NOUN
fuelectenerg-198	167	7	)	)	PUNCT
fuelectenerg-198	167	8	dhk	dhk	PROPN
fuelectenerg-198	167	9	(	(	PUNCT
fuelectenerg-198	167	10	nm	nm	NOUN
fuelectenerg-198	167	11	)	)	PUNCT
fuelectenerg-198	167	12	e	e	NUM
fuelectenerg-198	167	13	(	(	PUNCT
fuelectenerg-198	167	14	ev	ev	NOUN
fuelectenerg-198	167	15	)	)	PUNCT
fuelectenerg-198	167	16	h	h	X
fuelectenerg-198	167	17	(	(	PUNCT
fuelectenerg-198	167	18	ev	ev	INTJ
fuelectenerg-198	167	19	)	)	PUNCT
fuelectenerg-198	167	20	hc	hc	PROPN
fuelectenerg-198	167	21	(	(	PUNCT
fuelectenerg-198	167	22			PROPN
fuelectenerg-198	167	23	-1cm-1)	-1cm-1)	PUNCT
fuelectenerg-198	167	24	hk(0	hk(0	NOUN
fuelectenerg-198	167	25	)	)	PUNCT
fuelectenerg-198	167	26	(	(	PUNCT
fuelectenerg-198	167	27	-1cm-1)	-1cm-1)	X
fuelectenerg-198	167	28	al	al	PROPN
fuelectenerg-198	167	29	2.78	2.78	NUM
fuelectenerg-198	167	30	47	47	NUM
fuelectenerg-198	167	31	3.15	3.15	NUM
fuelectenerg-198	167	32	4.70	4.70	NUM
fuelectenerg-198	167	33	8.110	8.110	NUM
fuelectenerg-198	167	34	-	-	SYM
fuelectenerg-198	167	35	17	17	NUM
fuelectenerg-198	167	36	8.210	8.210	NUM
fuelectenerg-198	167	37	-	-	SYM
fuelectenerg-198	167	38	11	11	NUM
fuelectenerg-198	167	39	au	au	ADP
fuelectenerg-198	167	40	2.72	2.72	NUM
fuelectenerg-198	167	41	47	47	NUM
fuelectenerg-198	167	42	3.15	3.15	NUM
fuelectenerg-198	167	43	4.70	4.70	NUM
fuelectenerg-198	167	44	8.110	8.110	NUM
fuelectenerg-198	167	45	-	-	SYM
fuelectenerg-198	167	46	17	17	NUM
fuelectenerg-198	167	47	6.610	6.610	NOUN
fuelectenerg-198	167	48	-	-	SYM
fuelectenerg-198	167	49	14	14	NUM
fuelectenerg-198	167	50	w	w	PROPN
fuelectenerg-198	167	51	2.80	2.80	NUM
fuelectenerg-198	167	52	47	47	NUM
fuelectenerg-198	167	53	3.15	3.15	NUM
fuelectenerg-198	167	54	4.70	4.70	NUM
fuelectenerg-198	167	55	8.110	8.110	NUM
fuelectenerg-198	167	56	-	-	SYM
fuelectenerg-198	167	57	17	17	NUM
fuelectenerg-198	167	58	1.710	1.710	NUM
fuelectenerg-198	167	59	-	-	SYM
fuelectenerg-198	167	60	13	13	NUM
fuelectenerg-198	167	61	r.f	r.f	NOUN
fuelectenerg-198	167	62	sputtered	sputter	VERB
fuelectenerg-198	167	63	ta2o5	ta2o5	NOUN
fuelectenerg-198	167	64	at	at	ADP
fuelectenerg-198	167	65	493	493	NUM
fuelectenerg-198	167	66	k	k	NOUN
fuelectenerg-198	167	67	on	on	ADP
fuelectenerg-198	167	68	si	si	NOUN
fuelectenerg-198	167	69	nitrided	nitride	VERB
fuelectenerg-198	167	70	in	in	ADP
fuelectenerg-198	167	71	nitrous	nitrous	ADJ
fuelectenerg-198	167	72	oxide	oxide	NOUN
fuelectenerg-198	167	73	at	at	ADP
fuelectenerg-198	167	74	temperatures	temperature	NOUN
fuelectenerg-198	167	75	ton	ton	NOUN
fuelectenerg-198	168	1	[	[	X
fuelectenerg-198	168	2	52]	52]	ADJ
fuelectenerg-198	168	3	ton	ton	NOUN
fuelectenerg-198	168	4	(	(	PUNCT
fuelectenerg-198	168	5	k	k	NOUN
fuelectenerg-198	168	6	)	)	PUNCT
fuelectenerg-198	168	7	dif	dif	X
fuelectenerg-198	168	8	(	(	PUNCT
fuelectenerg-198	168	9	nm	nm	NOUN
fuelectenerg-198	168	10	)	)	PUNCT
fuelectenerg-198	168	11	dhk	dhk	PROPN
fuelectenerg-198	168	12	(	(	PUNCT
fuelectenerg-198	168	13	nm	nm	NOUN
fuelectenerg-198	168	14	)	)	PUNCT
fuelectenerg-198	168	15	e	e	NUM
fuelectenerg-198	168	16	(	(	PUNCT
fuelectenerg-198	168	17	ev	ev	NOUN
fuelectenerg-198	168	18	)	)	PUNCT
fuelectenerg-198	168	19	h	h	X
fuelectenerg-198	168	20	(	(	PUNCT
fuelectenerg-198	168	21	ev	ev	INTJ
fuelectenerg-198	168	22	)	)	PUNCT
fuelectenerg-198	168	23	hc	hc	PROPN
fuelectenerg-198	168	24	(	(	PUNCT
fuelectenerg-198	168	25			PROPN
fuelectenerg-198	168	26	-1cm-1)	-1cm-1)	PUNCT
fuelectenerg-198	168	27	hk(0	hk(0	NOUN
fuelectenerg-198	168	28	)	)	PUNCT
fuelectenerg-198	168	29	(	(	PUNCT
fuelectenerg-198	168	30	-1cm-1)	-1cm-1)	X
fuelectenerg-198	168	31	973	973	NUM
fuelectenerg-198	168	32	2.65	2.65	NUM
fuelectenerg-198	168	33	17.3	17.3	NUM
fuelectenerg-198	168	34	2.92	2.92	NUM
fuelectenerg-198	168	35	ev	ev	ADP
fuelectenerg-198	168	36	3.35	3.35	NUM
fuelectenerg-198	168	37	ev	ev	ADP
fuelectenerg-198	168	38	410	410	NUM
fuelectenerg-198	168	39	-	-	SYM
fuelectenerg-198	168	40	15	15	NUM
fuelectenerg-198	168	41	3.310	3.310	NUM
fuelectenerg-198	168	42	-	-	SYM
fuelectenerg-198	168	43	8	8	NUM
fuelectenerg-198	168	44	1073	1073	NUM
fuelectenerg-198	168	45	2.70	2.70	NUM
fuelectenerg-198	168	46	17.3	17.3	NUM
fuelectenerg-198	168	47	2.85	2.85	NUM
fuelectenerg-198	168	48	ev	ev	ADP
fuelectenerg-198	168	49	3.50	3.50	NUM
fuelectenerg-198	168	50	ev	ev	ADP
fuelectenerg-198	168	51	110	110	NUM
fuelectenerg-198	168	52	-	-	SYM
fuelectenerg-198	168	53	15	15	NUM
fuelectenerg-198	168	54	3.310	3.310	NUM
fuelectenerg-198	168	55	-	-	SYM
fuelectenerg-198	168	56	8	8	NUM
fuelectenerg-198	168	57	1123	1123	NUM
fuelectenerg-198	168	58	2.80	2.80	NUM
fuelectenerg-198	168	59	17.2	17.2	NUM
fuelectenerg-198	168	60	2.80	2.80	NUM
fuelectenerg-198	168	61	ev	ev	ADP
fuelectenerg-198	168	62	3.50	3.50	NUM
fuelectenerg-198	168	63	ev	ev	INTJ
fuelectenerg-198	168	64	310	310	NUM
fuelectenerg-198	168	65	-	-	SYM
fuelectenerg-198	168	66	15	15	NUM
fuelectenerg-198	168	67	3.310	3.310	NUM
fuelectenerg-198	168	68	-	-	SYM
fuelectenerg-198	168	69	8	8	NUM
fuelectenerg-198	168	70	r.f	r.f	NOUN
fuelectenerg-198	168	71	sputtered	sputter	VERB
fuelectenerg-198	168	72	ta2o5	ta2o5	NOUN
fuelectenerg-198	168	73	at	at	ADP
fuelectenerg-198	168	74	493	493	NUM
fuelectenerg-198	168	75	k	k	NOUN
fuelectenerg-198	168	76	on	on	ADP
fuelectenerg-198	168	77	si	si	NOUN
fuelectenerg-198	168	78	nitrided	nitride	VERB
fuelectenerg-198	168	79	in	in	ADP
fuelectenerg-198	168	80	ammonia	ammonia	NOUN
fuelectenerg-198	168	81	at	at	ADP
fuelectenerg-198	168	82	temperatures	temperature	NOUN
fuelectenerg-198	168	83	ton	ton	NOUN
fuelectenerg-198	169	1	[	[	X
fuelectenerg-198	169	2	52]	52]	ADJ
fuelectenerg-198	169	3	ton	ton	NOUN
fuelectenerg-198	169	4	(	(	PUNCT
fuelectenerg-198	169	5	k	k	NOUN
fuelectenerg-198	169	6	)	)	PUNCT
fuelectenerg-198	169	7	dif	dif	X
fuelectenerg-198	169	8	(	(	PUNCT
fuelectenerg-198	169	9	nm	nm	NOUN
fuelectenerg-198	169	10	)	)	PUNCT
fuelectenerg-198	169	11	dhk	dhk	PROPN
fuelectenerg-198	169	12	(	(	PUNCT
fuelectenerg-198	169	13	nm	nm	NOUN
fuelectenerg-198	169	14	)	)	PUNCT
fuelectenerg-198	169	15	e	e	NUM
fuelectenerg-198	169	16	(	(	PUNCT
fuelectenerg-198	169	17	ev	ev	NOUN
fuelectenerg-198	169	18	)	)	PUNCT
fuelectenerg-198	169	19	h	h	X
fuelectenerg-198	169	20	(	(	PUNCT
fuelectenerg-198	169	21	ev	ev	INTJ
fuelectenerg-198	169	22	)	)	PUNCT
fuelectenerg-198	169	23	hc	hc	PROPN
fuelectenerg-198	169	24	(	(	PUNCT
fuelectenerg-198	169	25			PROPN
fuelectenerg-198	169	26	-1cm-1)	-1cm-1)	PUNCT
fuelectenerg-198	169	27	hk(0	hk(0	NOUN
fuelectenerg-198	169	28	)	)	PUNCT
fuelectenerg-198	169	29	(	(	PUNCT
fuelectenerg-198	169	30	-1cm-1)	-1cm-1)	X
fuelectenerg-198	169	31	973	973	NUM
fuelectenerg-198	169	32	2.70	2.70	NUM
fuelectenerg-198	169	33	17.3	17.3	NUM
fuelectenerg-198	169	34	2.60	2.60	NUM
fuelectenerg-198	169	35	ev	ev	ADP
fuelectenerg-198	169	36	3.30	3.30	NUM
fuelectenerg-198	169	37	ev	ev	PRON
fuelectenerg-198	169	38	110	110	NUM
fuelectenerg-198	169	39	-	-	SYM
fuelectenerg-198	169	40	15	15	NUM
fuelectenerg-198	169	41	3.310	3.310	NUM
fuelectenerg-198	169	42	-	-	SYM
fuelectenerg-198	169	43	8	8	NUM
fuelectenerg-198	169	44	1073	1073	NUM
fuelectenerg-198	169	45	2.80	2.80	NUM
fuelectenerg-198	169	46	17.2	17.2	NUM
fuelectenerg-198	169	47	2.85	2.85	NUM
fuelectenerg-198	169	48	ev	ev	ADP
fuelectenerg-198	169	49	3.25	3.25	NUM
fuelectenerg-198	169	50	ev	ev	ADP
fuelectenerg-198	169	51	110	110	NUM
fuelectenerg-198	169	52	-	-	SYM
fuelectenerg-198	169	53	15	15	NUM
fuelectenerg-198	169	54	3.310	3.310	NUM
fuelectenerg-198	169	55	-	-	SYM
fuelectenerg-198	169	56	8	8	NUM
fuelectenerg-198	169	57	ta2o5	ta2o5	VERB
fuelectenerg-198	169	58	obtained	obtain	VERB
fuelectenerg-198	169	59	by	by	ADP
fuelectenerg-198	169	60	thermal	thermal	ADJ
fuelectenerg-198	169	61	oxidation	oxidation	NOUN
fuelectenerg-198	169	62	of	of	ADP
fuelectenerg-198	169	63	ta	ta	PROPN
fuelectenerg-198	169	64	in	in	ADP
fuelectenerg-198	169	65	pure	pure	ADJ
fuelectenerg-198	169	66	o2	o2	PROPN
fuelectenerg-198	169	67	at	at	ADP
fuelectenerg-198	169	68	873	873	NUM
fuelectenerg-198	169	69	k	k	NOUN
fuelectenerg-198	169	70	on	on	ADP
fuelectenerg-198	169	71	bare	bare	ADJ
fuelectenerg-198	169	72	si	si	PROPN
fuelectenerg-198	170	1	[	[	X
fuelectenerg-198	170	2	53]	53]	NUM
fuelectenerg-198	170	3	gate	gate	NOUN
fuelectenerg-198	170	4	dif	dif	ADV
fuelectenerg-198	170	5	(	(	PUNCT
fuelectenerg-198	170	6	nm	nm	NOUN
fuelectenerg-198	170	7	)	)	PUNCT
fuelectenerg-198	170	8	dhk	dhk	PROPN
fuelectenerg-198	170	9	(	(	PUNCT
fuelectenerg-198	170	10	nm	nm	NOUN
fuelectenerg-198	170	11	)	)	PUNCT
fuelectenerg-198	170	12	e	e	NUM
fuelectenerg-198	170	13	(	(	PUNCT
fuelectenerg-198	170	14	ev	ev	NOUN
fuelectenerg-198	170	15	)	)	PUNCT
fuelectenerg-198	170	16	h	h	X
fuelectenerg-198	170	17	(	(	PUNCT
fuelectenerg-198	170	18	ev	ev	INTJ
fuelectenerg-198	170	19	)	)	PUNCT
fuelectenerg-198	170	20	hc	hc	PROPN
fuelectenerg-198	170	21	(	(	PUNCT
fuelectenerg-198	170	22			PROPN
fuelectenerg-198	170	23	-1cm-1)	-1cm-1)	PUNCT
fuelectenerg-198	170	24	hk(0	hk(0	NOUN
fuelectenerg-198	170	25	)	)	PUNCT
fuelectenerg-198	170	26	(	(	PUNCT
fuelectenerg-198	170	27	-1cm-1)	-1cm-1)	X
fuelectenerg-198	170	28	al	al	PROPN
fuelectenerg-198	170	29	1.84	1.84	NUM
fuelectenerg-198	170	30	8.1	8.1	NUM
fuelectenerg-198	170	31	3.15	3.15	NUM
fuelectenerg-198	170	32	4.4	4.4	NUM
fuelectenerg-198	170	33	110	110	NUM
fuelectenerg-198	170	34	-	-	SYM
fuelectenerg-198	170	35	15	15	NUM
fuelectenerg-198	170	36	210	210	NUM
fuelectenerg-198	170	37	-	-	SYM
fuelectenerg-198	170	38	9	9	NUM
fuelectenerg-198	170	39	w	w	PROPN
fuelectenerg-198	170	40	2.04	2.04	NUM
fuelectenerg-198	170	41	8.0	8.0	NUM
fuelectenerg-198	170	42	3.15	3.15	NUM
fuelectenerg-198	170	43	4.7	4.7	NUM
fuelectenerg-198	170	44	210	210	NUM
fuelectenerg-198	170	45	-	-	SYM
fuelectenerg-198	170	46	15	15	NUM
fuelectenerg-198	170	47	810	810	NUM
fuelectenerg-198	170	48	-	-	SYM
fuelectenerg-198	170	49	11	11	NUM
fuelectenerg-198	170	50	au	au	NOUN
fuelectenerg-198	170	51	2.05	2.05	NUM
fuelectenerg-198	170	52	8.0	8.0	NUM
fuelectenerg-198	170	53	3.15	3.15	NUM
fuelectenerg-198	170	54	4.7	4.7	NUM
fuelectenerg-198	170	55	510	510	NUM
fuelectenerg-198	170	56	-	-	SYM
fuelectenerg-198	170	57	16	16	NUM
fuelectenerg-198	170	58	810	810	NUM
fuelectenerg-198	170	59	-	-	SYM
fuelectenerg-198	170	60	11	11	NUM
fuelectenerg-198	170	61	metal	metal	NOUN
fuelectenerg-198	170	62	-	-	PUNCT
fuelectenerg-198	170	63	hf	hf	NOUN
fuelectenerg-198	170	64	:	:	PUNCT
fuelectenerg-198	170	65	ta2o5	ta2o5	PROPN
fuelectenerg-198	170	66	/	/	SYM
fuelectenerg-198	170	67	sioxny	sioxny	PROPN
fuelectenerg-198	170	68	-	-	PUNCT
fuelectenerg-198	170	69	si	si	NOUN
fuelectenerg-198	170	70	structures	structure	NOUN
fuelectenerg-198	170	71	(	(	PUNCT
fuelectenerg-198	170	72	work	work	NOUN
fuelectenerg-198	170	73	in	in	ADP
fuelectenerg-198	170	74	progress)	progress)	PROPN
fuelectenerg-198	170	75	gate	gate	NOUN
fuelectenerg-198	170	76	dif	dif	ADV
fuelectenerg-198	170	77	(	(	PUNCT
fuelectenerg-198	170	78	nm	nm	NOUN
fuelectenerg-198	170	79	)	)	PUNCT
fuelectenerg-198	170	80	dhk	dhk	PROPN
fuelectenerg-198	170	81	(	(	PUNCT
fuelectenerg-198	170	82	nm	nm	NOUN
fuelectenerg-198	170	83	)	)	PUNCT
fuelectenerg-198	170	84	e	e	NUM
fuelectenerg-198	170	85	(	(	PUNCT
fuelectenerg-198	170	86	ev	ev	NOUN
fuelectenerg-198	170	87	)	)	PUNCT
fuelectenerg-198	170	88	h	h	X
fuelectenerg-198	170	89	(	(	PUNCT
fuelectenerg-198	170	90	ev	ev	INTJ
fuelectenerg-198	170	91	)	)	PUNCT
fuelectenerg-198	170	92	hc	hc	PROPN
fuelectenerg-198	170	93	(	(	PUNCT
fuelectenerg-198	170	94			PROPN
fuelectenerg-198	170	95	-1cm-1)	-1cm-1)	PUNCT
fuelectenerg-198	170	96	hk(0	hk(0	NOUN
fuelectenerg-198	170	97	)	)	PUNCT
fuelectenerg-198	170	98	(	(	PUNCT
fuelectenerg-198	170	99	-1cm-1)	-1cm-1)	X
fuelectenerg-198	170	100	ag	ag	PROPN
fuelectenerg-198	170	101	2.56	2.56	NUM
fuelectenerg-198	170	102	5.44	5.44	NUM
fuelectenerg-198	170	103	2.6	2.6	NUM
fuelectenerg-198	170	104	4.2	4.2	NUM
fuelectenerg-198	170	105	210	210	NUM
fuelectenerg-198	170	106	-	-	SYM
fuelectenerg-198	170	107	16	16	NUM
fuelectenerg-198	170	108	210	210	NUM
fuelectenerg-198	170	109	-	-	SYM
fuelectenerg-198	170	110	16	16	NUM
fuelectenerg-198	170	111	w	w	PROPN
fuelectenerg-198	170	112	2.24	2.24	NUM
fuelectenerg-198	170	113	5.76	5.76	NUM
fuelectenerg-198	170	114	2.6	2.6	NUM
fuelectenerg-198	170	115	4.2	4.2	NUM
fuelectenerg-198	170	116	710	710	NUM
fuelectenerg-198	170	117	-	-	SYM
fuelectenerg-198	170	118	15	15	NUM
fuelectenerg-198	170	119	210	210	NUM
fuelectenerg-198	170	120	-	-	SYM
fuelectenerg-198	170	121	14	14	NUM
fuelectenerg-198	170	122	tin	tin	NOUN
fuelectenerg-198	170	123	2.10	2.10	NUM
fuelectenerg-198	170	124	5.90	5.90	NUM
fuelectenerg-198	170	125	2.6	2.6	NUM
fuelectenerg-198	170	126	4.2	4.2	NUM
fuelectenerg-198	170	127	1.210	1.210	NUM
fuelectenerg-198	170	128	-	-	PUNCT
fuelectenerg-198	170	129	12	12	NUM
fuelectenerg-198	170	130	110	110	NUM
fuelectenerg-198	170	131	-	-	SYM
fuelectenerg-198	170	132	11	11	NUM
fuelectenerg-198	170	133	first	first	ADV
fuelectenerg-198	170	134	,	,	PUNCT
fuelectenerg-198	170	135	as	as	SCONJ
fuelectenerg-198	170	136	is	be	AUX
fuelectenerg-198	170	137	seen	see	VERB
fuelectenerg-198	170	138	from	from	ADP
fuelectenerg-198	170	139	data	datum	NOUN
fuelectenerg-198	170	140	for	for	ADP
fuelectenerg-198	170	141	r.f	r.f	PROPN
fuelectenerg-198	170	142	.	.	PROPN
fuelectenerg-198	170	143	sputtered	sputter	VERB
fuelectenerg-198	170	144	ta2o5	ta2o5	PROPN
fuelectenerg-198	170	145	on	on	ADP
fuelectenerg-198	170	146	bare	bare	ADJ
fuelectenerg-198	170	147	si	si	NOUN
fuelectenerg-198	170	148	at	at	ADP
fuelectenerg-198	170	149	substrate	substrate	NOUN
fuelectenerg-198	170	150	temperature	temperature	NOUN
fuelectenerg-198	170	151	493	493	NUM
fuelectenerg-198	170	152	k	k	NOUN
fuelectenerg-198	170	153	,	,	PUNCT
fuelectenerg-198	170	154	unannealed	unannealed	ADJ
fuelectenerg-198	170	155	films	film	NOUN
fuelectenerg-198	170	156	posses	posse	VERB
fuelectenerg-198	170	157	high	high	ADJ
fuelectenerg-198	170	158	defect	defect	NOUN
fuelectenerg-198	170	159	density	density	NOUN
fuelectenerg-198	170	160	,	,	PUNCT
fuelectenerg-198	170	161	as	as	SCONJ
fuelectenerg-198	170	162	manifested	manifest	VERB
fuelectenerg-198	170	163	by	by	ADP
fuelectenerg-198	170	164	a	a	DET
fuelectenerg-198	170	165	high	high	ADJ
fuelectenerg-198	170	166	value	value	NOUN
fuelectenerg-198	170	167	of	of	ADP
fuelectenerg-198	170	168	the	the	DET
fuelectenerg-198	170	169	parameter	parameter	NOUN
fuelectenerg-198	170	170	hk(0	hk(0	NOUN
fuelectenerg-198	170	171	)	)	PUNCT
fuelectenerg-198	170	172	;	;	PUNCT
fuelectenerg-198	170	173	annealing	anneal	VERB
fuelectenerg-198	170	174	substantially	substantially	ADV
fuelectenerg-198	170	175	reduces	reduce	VERB
fuelectenerg-198	170	176	density	density	NOUN
fuelectenerg-198	170	177	of	of	ADP
fuelectenerg-198	170	178	these	these	DET
fuelectenerg-198	170	179	defects	defect	NOUN
fuelectenerg-198	170	180	.	.	PUNCT
fuelectenerg-198	171	1	annealing	anneal	VERB
fuelectenerg-198	171	2	also	also	ADV
fuelectenerg-198	171	3	increases	increase	VERB
fuelectenerg-198	171	4	the	the	DET
fuelectenerg-198	171	5	band	band	NOUN
fuelectenerg-198	171	6	offsets	offset	NOUN
fuelectenerg-198	171	7	,	,	PUNCT
fuelectenerg-198	171	8	thus	thus	ADV
fuelectenerg-198	171	9	substantially	substantially	ADV
fuelectenerg-198	171	10	reducing	reduce	VERB
fuelectenerg-198	171	11	leakage	leakage	NOUN
fuelectenerg-198	171	12	currents	current	NOUN
fuelectenerg-198	171	13	.	.	PUNCT
fuelectenerg-198	172	1	this	this	PRON
fuelectenerg-198	172	2	is	be	AUX
fuelectenerg-198	172	3	attributed	attribute	VERB
fuelectenerg-198	172	4	to	to	ADP
fuelectenerg-198	172	5	the	the	DET
fuelectenerg-198	172	6	improvement	improvement	NOUN
fuelectenerg-198	172	7	of	of	ADP
fuelectenerg-198	172	8	stoichiometry	stoichiometry	NOUN
fuelectenerg-198	172	9	of	of	ADP
fuelectenerg-198	172	10	the	the	DET
fuelectenerg-198	172	11	interfacial	interfacial	ADJ
fuelectenerg-198	172	12	silicon	silicon	NOUN
fuelectenerg-198	172	13	oxide	oxide	NOUN
fuelectenerg-198	172	14	.	.	PUNCT
fuelectenerg-198	173	1	second	second	ADJ
fuelectenerg-198	173	2	,	,	PUNCT
fuelectenerg-198	173	3	for	for	ADP
fuelectenerg-198	173	4	ta2o5	ta2o5	PROPN
fuelectenerg-198	173	5	obtained	obtain	VERB
fuelectenerg-198	173	6	by	by	ADP
fuelectenerg-198	173	7	thermal	thermal	ADJ
fuelectenerg-198	173	8	oxidation	oxidation	NOUN
fuelectenerg-198	173	9	of	of	ADP
fuelectenerg-198	173	10	ta	ta	PROPN
fuelectenerg-198	173	11	in	in	ADP
fuelectenerg-198	173	12	pure	pure	ADJ
fuelectenerg-198	173	13	o2	o2	PROPN
fuelectenerg-198	173	14	at	at	ADP
fuelectenerg-198	173	15	873	873	NUM
fuelectenerg-198	173	16	k	k	NOUN
fuelectenerg-198	173	17	on	on	ADP
fuelectenerg-198	173	18	bare	bare	ADJ
fuelectenerg-198	173	19	si	si	INTJ
fuelectenerg-198	173	20	it	it	PRON
fuelectenerg-198	173	21	is	be	AUX
fuelectenerg-198	173	22	obtained	obtain	VERB
fuelectenerg-198	173	23	that	that	DET
fuelectenerg-198	173	24	band	band	NOUN
fuelectenerg-198	173	25	offsets	offset	NOUN
fuelectenerg-198	173	26	are	be	AUX
fuelectenerg-198	173	27	those	those	PRON
fuelectenerg-198	173	28	for	for	ADP
fuelectenerg-198	173	29	sio2	sio2	NOUN
fuelectenerg-198	173	30	,	,	PUNCT
fuelectenerg-198	173	31	indicating	indicate	VERB
fuelectenerg-198	173	32	that	that	SCONJ
fuelectenerg-198	173	33	thermally	thermally	ADV
fuelectenerg-198	173	34	grown	grow	VERB
fuelectenerg-198	173	35	films	film	NOUN
fuelectenerg-198	173	36	posses	posse	VERB
fuelectenerg-198	173	37	an	an	DET
fuelectenerg-198	173	38	sio2	sio2	VERB
fuelectenerg-198	173	39	-	-	PUNCT
fuelectenerg-198	173	40	like	like	ADJ
fuelectenerg-198	173	41	interfacial	interfacial	ADJ
fuelectenerg-198	173	42	layer	layer	NOUN
fuelectenerg-198	173	43	.	.	PUNCT
fuelectenerg-198	174	1	the	the	DET
fuelectenerg-198	174	2	parameter	parameter	NOUN
fuelectenerg-198	174	3	depending	depend	VERB
fuelectenerg-198	174	4	on	on	ADP
fuelectenerg-198	174	5	the	the	DET
fuelectenerg-198	174	6	deffect	deffect	ADJ
fuelectenerg-198	174	7	density	density	NOUN
fuelectenerg-198	174	8	in	in	ADP
fuelectenerg-198	174	9	the	the	DET
fuelectenerg-198	174	10	high	high	ADJ
fuelectenerg-198	174	11	-	-	PUNCT
fuelectenerg-198	174	12	k	k	NOUN
fuelectenerg-198	174	13	layer	layer	NOUN
fuelectenerg-198	174	14	,	,	PUNCT
fuelectenerg-198	174	15	hk(0	hk(0	NOUN
fuelectenerg-198	174	16	)	)	PUNCT
fuelectenerg-198	174	17	,	,	PUNCT
fuelectenerg-198	174	18	is	be	AUX
fuelectenerg-198	174	19	about	about	ADV
fuelectenerg-198	174	20	two	two	NUM
fuelectenerg-198	174	21	order	order	NOUN
fuelectenerg-198	174	22	of	of	ADP
fuelectenerg-198	174	23	magnitude	magnitude	NOUN
fuelectenerg-198	174	24	higher	high	ADJ
fuelectenerg-198	174	25	for	for	ADP
fuelectenerg-198	174	26	reactive	reactive	ADJ
fuelectenerg-198	174	27	al	al	PROPN
fuelectenerg-198	174	28	gate	gate	PROPN
fuelectenerg-198	174	29	than	than	ADP
fuelectenerg-198	174	30	for	for	ADP
fuelectenerg-198	174	31	the	the	DET
fuelectenerg-198	174	32	nonreactive	nonreactive	ADJ
fuelectenerg-198	174	33	au	au	PROPN
fuelectenerg-198	174	34	,	,	PUNCT
fuelectenerg-198	174	35	w	w	NOUN
fuelectenerg-198	174	36	and	and	CCONJ
fuelectenerg-198	174	37	tin	tin	NOUN
fuelectenerg-198	174	38	gates	gate	NOUN
fuelectenerg-198	174	39	,	,	PUNCT
fuelectenerg-198	174	40	indicating	indicate	VERB
fuelectenerg-198	174	41	that	that	SCONJ
fuelectenerg-198	174	42	deposition	deposition	NOUN
fuelectenerg-198	174	43	of	of	ADP
fuelectenerg-198	174	44	the	the	DET
fuelectenerg-198	174	45	reactive	reactive	ADJ
fuelectenerg-198	174	46	gate	gate	NOUN
fuelectenerg-198	174	47	creates	create	VERB
fuelectenerg-198	174	48	high	high	ADJ
fuelectenerg-198	174	49	amount	amount	NOUN
fuelectenerg-198	174	50	of	of	ADP
fuelectenerg-198	174	51	defects	defect	NOUN
fuelectenerg-198	174	52	in	in	ADP
fuelectenerg-198	174	53	the	the	DET
fuelectenerg-198	174	54	high	high	ADJ
fuelectenerg-198	174	55	-	-	PUNCT
fuelectenerg-198	174	56	k	k	NOUN
fuelectenerg-198	174	57	layer	layer	NOUN
fuelectenerg-198	174	58	.	.	PUNCT
fuelectenerg-198	175	1	thickness	thickness	NOUN
fuelectenerg-198	175	2	of	of	ADP
fuelectenerg-198	175	3	the	the	DET
fuelectenerg-198	175	4	layer	layer	NOUN
fuelectenerg-198	175	5	is	be	AUX
fuelectenerg-198	175	6	practically	practically	ADV
fuelectenerg-198	175	7	independent	independent	ADJ
fuelectenerg-198	175	8	on	on	ADP
fuelectenerg-198	175	9	the	the	DET
fuelectenerg-198	175	10	gate	gate	NOUN
fuelectenerg-198	175	11	material	material	NOUN
fuelectenerg-198	175	12	for	for	ADP
fuelectenerg-198	175	13	films	film	NOUN
fuelectenerg-198	175	14	as	as	ADV
fuelectenerg-198	175	15	thick	thick	ADJ
fuelectenerg-198	175	16	as	as	ADP
fuelectenerg-198	175	17	50	50	NUM
fuelectenerg-198	175	18	nm	nm	NOUN
fuelectenerg-198	175	19	[	[	X
fuelectenerg-198	175	20	44	44	NUM
fuelectenerg-198	175	21	]	]	PUNCT
fuelectenerg-198	175	22	,	,	PUNCT
fuelectenerg-198	175	23	and	and	CCONJ
fuelectenerg-198	175	24	weakly	weakly	ADJ
fuelectenerg-198	175	25	dependent	dependent	ADJ
fuelectenerg-198	175	26	physical	physical	ADJ
fuelectenerg-198	175	27	modeling	modeling	NOUN
fuelectenerg-198	175	28	of	of	ADP
fuelectenerg-198	175	29	ta2o5	ta2o5	PROPN
fuelectenerg-198	175	30	based	base	VERB
fuelectenerg-198	175	31	mos	mos	PROPN
fuelectenerg-198	175	32	capacitors	capacitor	NOUN
fuelectenerg-198	175	33	on	on	ADP
fuelectenerg-198	175	34	si	si	PROPN
fuelectenerg-198	175	35	269	269	NUM
fuelectenerg-198	175	36	on	on	ADP
fuelectenerg-198	175	37	the	the	DET
fuelectenerg-198	175	38	gate	gate	NOUN
fuelectenerg-198	175	39	material	material	NOUN
fuelectenerg-198	175	40	in	in	ADP
fuelectenerg-198	175	41	the	the	DET
fuelectenerg-198	175	42	case	case	NOUN
fuelectenerg-198	175	43	of	of	ADP
fuelectenerg-198	175	44	films	film	NOUN
fuelectenerg-198	175	45	as	as	ADV
fuelectenerg-198	175	46	thin	thin	ADJ
fuelectenerg-198	175	47	as	as	ADP
fuelectenerg-198	175	48	10	10	NUM
fuelectenerg-198	175	49	nm	nm	NOUN
fuelectenerg-198	175	50	or	or	CCONJ
fuelectenerg-198	175	51	thinner	thin	ADJ
fuelectenerg-198	175	52	(	(	PUNCT
fuelectenerg-198	175	53	nanosized	nanosized	ADJ
fuelectenerg-198	175	54	dielectric	dielectric	NOUN
fuelectenerg-198	175	55	)	)	PUNCT
fuelectenerg-198	176	1	[	[	X
fuelectenerg-198	176	2	53	53	NUM
fuelectenerg-198	176	3	]	]	PUNCT
fuelectenerg-198	176	4	.	.	PUNCT
fuelectenerg-198	177	1	low	low	ADJ
fuelectenerg-198	177	2	-	-	PUNCT
fuelectenerg-198	177	3	field	field	NOUN
fuelectenerg-198	177	4	conductivity	conductivity	NOUN
fuelectenerg-198	177	5	(	(	PUNCT
fuelectenerg-198	177	6	hc	hc	PROPN
fuelectenerg-198	177	7	)	)	PUNCT
fuelectenerg-198	177	8	for	for	ADP
fuelectenerg-198	177	9	films	film	NOUN
fuelectenerg-198	177	10	as	as	ADV
fuelectenerg-198	177	11	thick	thick	ADJ
fuelectenerg-198	177	12	as	as	SCONJ
fuelectenerg-198	177	13	50	50	NUM
fuelectenerg-198	177	14	nm	nm	NOUN
fuelectenerg-198	177	15	is	be	AUX
fuelectenerg-198	177	16	independent	independent	ADJ
fuelectenerg-198	177	17	on	on	ADP
fuelectenerg-198	177	18	the	the	DET
fuelectenerg-198	177	19	gate	gate	NOUN
fuelectenerg-198	177	20	material	material	NOUN
fuelectenerg-198	177	21	[	[	X
fuelectenerg-198	177	22	44	44	NUM
fuelectenerg-198	177	23	]	]	PUNCT
fuelectenerg-198	177	24	,	,	PUNCT
fuelectenerg-198	177	25	while	while	SCONJ
fuelectenerg-198	177	26	for	for	ADP
fuelectenerg-198	177	27	nanosized	nanosized	ADJ
fuelectenerg-198	177	28	films	film	NOUN
fuelectenerg-198	177	29	it	it	PRON
fuelectenerg-198	177	30	is	be	AUX
fuelectenerg-198	177	31	somehow	somehow	ADV
fuelectenerg-198	177	32	reduced	reduce	VERB
fuelectenerg-198	177	33	in	in	ADP
fuelectenerg-198	177	34	the	the	DET
fuelectenerg-198	177	35	case	case	NOUN
fuelectenerg-198	177	36	of	of	ADP
fuelectenerg-198	177	37	reactive	reactive	NOUN
fuelectenerg-198	177	38	al	al	PROPN
fuelectenerg-198	177	39	gate	gate	NOUN
fuelectenerg-198	178	1	[	[	X
fuelectenerg-198	178	2	53	53	NUM
fuelectenerg-198	178	3	]	]	PUNCT
fuelectenerg-198	178	4	.	.	PUNCT
fuelectenerg-198	179	1	therefore	therefore	ADV
fuelectenerg-198	179	2	,	,	PUNCT
fuelectenerg-198	179	3	we	we	PRON
fuelectenerg-198	179	4	conclude	conclude	VERB
fuelectenerg-198	179	5	that	that	SCONJ
fuelectenerg-198	179	6	the	the	DET
fuelectenerg-198	179	7	reactive	reactive	NOUN
fuelectenerg-198	179	8	gate	gate	NOUN
fuelectenerg-198	179	9	in	in	ADP
fuelectenerg-198	179	10	the	the	DET
fuelectenerg-198	179	11	case	case	NOUN
fuelectenerg-198	179	12	of	of	ADP
fuelectenerg-198	179	13	nanosized	nanosized	ADJ
fuelectenerg-198	179	14	high	high	ADJ
fuelectenerg-198	179	15	-	-	PUNCT
fuelectenerg-198	179	16	k	k	NOUN
fuelectenerg-198	179	17	dielectrics	dielectric	NOUN
fuelectenerg-198	179	18	affects	affect	VERB
fuelectenerg-198	179	19	also	also	ADV
fuelectenerg-198	179	20	interfacial	interfacial	ADJ
fuelectenerg-198	179	21	layer	layer	NOUN
fuelectenerg-198	179	22	.	.	PUNCT
fuelectenerg-198	180	1	third	third	ADJ
fuelectenerg-198	180	2	,	,	PUNCT
fuelectenerg-198	180	3	it	it	PRON
fuelectenerg-198	180	4	is	be	AUX
fuelectenerg-198	180	5	seen	see	VERB
fuelectenerg-198	180	6	that	that	SCONJ
fuelectenerg-198	180	7	substrate	substrate	NOUN
fuelectenerg-198	180	8	nitridation	nitridation	NOUN
fuelectenerg-198	180	9	reduces	reduce	VERB
fuelectenerg-198	180	10	band	band	NOUN
fuelectenerg-198	180	11	offsets	offset	NOUN
fuelectenerg-198	181	1	[	[	X
fuelectenerg-198	181	2	52	52	NUM
fuelectenerg-198	181	3	]	]	PUNCT
fuelectenerg-198	181	4	.	.	PUNCT
fuelectenerg-198	182	1	with	with	ADP
fuelectenerg-198	182	2	this	this	DET
fuelectenerg-198	182	3	effect	effect	NOUN
fuelectenerg-198	182	4	alone	alone	ADV
fuelectenerg-198	182	5	,	,	PUNCT
fuelectenerg-198	182	6	the	the	DET
fuelectenerg-198	182	7	nitridation	nitridation	NOUN
fuelectenerg-198	182	8	would	would	AUX
fuelectenerg-198	182	9	degrade	degrade	VERB
fuelectenerg-198	182	10	leakage	leakage	NOUN
fuelectenerg-198	182	11	properties	property	NOUN
fuelectenerg-198	182	12	of	of	ADP
fuelectenerg-198	182	13	the	the	DET
fuelectenerg-198	182	14	dielectric	dielectric	ADJ
fuelectenerg-198	182	15	films	film	NOUN
fuelectenerg-198	182	16	.	.	PUNCT
fuelectenerg-198	183	1	nevertheless	nevertheless	ADV
fuelectenerg-198	183	2	,	,	PUNCT
fuelectenerg-198	183	3	there	there	PRON
fuelectenerg-198	183	4	is	be	VERB
fuelectenerg-198	183	5	a	a	DET
fuelectenerg-198	183	6	more	more	ADV
fuelectenerg-198	183	7	important	important	ADJ
fuelectenerg-198	183	8	beneficial	beneficial	ADJ
fuelectenerg-198	183	9	effect	effect	NOUN
fuelectenerg-198	183	10	of	of	ADP
fuelectenerg-198	183	11	nitridation	nitridation	NOUN
fuelectenerg-198	183	12	consisting	consist	VERB
fuelectenerg-198	183	13	in	in	ADP
fuelectenerg-198	183	14	an	an	DET
fuelectenerg-198	183	15	increase	increase	NOUN
fuelectenerg-198	183	16	of	of	ADP
fuelectenerg-198	183	17	the	the	DET
fuelectenerg-198	183	18	relative	relative	ADJ
fuelectenerg-198	183	19	permittivity	permittivity	NOUN
fuelectenerg-198	183	20	of	of	ADP
fuelectenerg-198	183	21	the	the	DET
fuelectenerg-198	183	22	interfacial	interfacial	ADJ
fuelectenerg-198	183	23	layer	layer	NOUN
fuelectenerg-198	183	24	and	and	CCONJ
fuelectenerg-198	183	25	substantial	substantial	ADJ
fuelectenerg-198	183	26	decrease	decrease	NOUN
fuelectenerg-198	183	27	of	of	ADP
fuelectenerg-198	183	28	the	the	DET
fuelectenerg-198	183	29	equivalent	equivalent	ADJ
fuelectenerg-198	183	30	thickness	thickness	NOUN
fuelectenerg-198	183	31	with	with	ADP
fuelectenerg-198	183	32	nitridation	nitridation	NOUN
fuelectenerg-198	183	33	.	.	PUNCT
fuelectenerg-198	184	1	as	as	ADP
fuelectenerg-198	184	2	a	a	DET
fuelectenerg-198	184	3	result	result	NOUN
fuelectenerg-198	184	4	,	,	PUNCT
fuelectenerg-198	184	5	leakage	leakage	NOUN
fuelectenerg-198	184	6	currents	current	NOUN
fuelectenerg-198	184	7	for	for	ADP
fuelectenerg-198	184	8	same	same	ADJ
fuelectenerg-198	184	9	equivalent	equivalent	ADJ
fuelectenerg-198	184	10	thicknesses	thickness	NOUN
fuelectenerg-198	184	11	are	be	AUX
fuelectenerg-198	184	12	lower	low	ADJ
fuelectenerg-198	184	13	for	for	ADP
fuelectenerg-198	184	14	films	film	NOUN
fuelectenerg-198	184	15	grown	grow	VERB
fuelectenerg-198	184	16	on	on	ADP
fuelectenerg-198	184	17	nitrided	nitride	VERB
fuelectenerg-198	184	18	substrates	substrate	NOUN
fuelectenerg-198	184	19	than	than	ADP
fuelectenerg-198	184	20	for	for	ADP
fuelectenerg-198	184	21	the	the	DET
fuelectenerg-198	184	22	films	film	NOUN
fuelectenerg-198	184	23	grown	grow	VERB
fuelectenerg-198	184	24	on	on	ADP
fuelectenerg-198	184	25	bare	bare	ADJ
fuelectenerg-198	184	26	substrates	substrate	NOUN
fuelectenerg-198	184	27	.	.	PUNCT
fuelectenerg-198	185	1	detailed	detailed	ADJ
fuelectenerg-198	185	2	analysis	analysis	NOUN
fuelectenerg-198	185	3	of	of	ADP
fuelectenerg-198	185	4	electrical	electrical	ADJ
fuelectenerg-198	185	5	and	and	CCONJ
fuelectenerg-198	185	6	dielectric	dielectric	ADJ
fuelectenerg-198	185	7	properties	property	NOUN
fuelectenerg-198	185	8	of	of	ADP
fuelectenerg-198	185	9	different	different	ADJ
fuelectenerg-198	185	10	mos	mos	PROPN
fuelectenerg-198	185	11	structures	structure	NOUN
fuelectenerg-198	185	12	containing	contain	VERB
fuelectenerg-198	185	13	high	high	ADJ
fuelectenerg-198	185	14	-	-	PUNCT
fuelectenerg-198	185	15	k	k	NOUN
fuelectenerg-198	185	16	dielectric	dielectric	NOUN
fuelectenerg-198	185	17	grown	grow	VERB
fuelectenerg-198	185	18	on	on	ADP
fuelectenerg-198	185	19	nitrided	nitride	VERB
fuelectenerg-198	185	20	si	si	NOUN
fuelectenerg-198	185	21	substrate	substrate	NOUN
fuelectenerg-198	185	22	have	have	AUX
fuelectenerg-198	185	23	been	be	AUX
fuelectenerg-198	185	24	reported	report	VERB
fuelectenerg-198	185	25	in	in	ADP
fuelectenerg-198	185	26	several	several	ADJ
fuelectenerg-198	185	27	works	work	NOUN
fuelectenerg-198	185	28	[	[	X
fuelectenerg-198	185	29	31],[52],[62	31],[52],[62	NUM
fuelectenerg-198	185	30	]	]	PUNCT
fuelectenerg-198	185	31	.	.	PUNCT
fuelectenerg-198	186	1	the	the	DET
fuelectenerg-198	186	2	model	model	NOUN
fuelectenerg-198	186	3	is	be	AUX
fuelectenerg-198	186	4	also	also	ADV
fuelectenerg-198	186	5	applicable	applicable	ADJ
fuelectenerg-198	186	6	to	to	ADP
fuelectenerg-198	186	7	the	the	DET
fuelectenerg-198	186	8	structures	structure	NOUN
fuelectenerg-198	186	9	containing	contain	VERB
fuelectenerg-198	186	10	ta2o5	ta2o5	PROPN
fuelectenerg-198	186	11	with	with	ADP
fuelectenerg-198	186	12	different	different	ADJ
fuelectenerg-198	186	13	metals	metal	NOUN
fuelectenerg-198	186	14	(	(	PUNCT
fuelectenerg-198	186	15	one	one	NUM
fuelectenerg-198	186	16	example	example	NOUN
fuelectenerg-198	186	17	is	be	AUX
fuelectenerg-198	186	18	given	give	VERB
fuelectenerg-198	186	19	in	in	ADP
fuelectenerg-198	186	20	the	the	DET
fuelectenerg-198	186	21	last	last	ADJ
fuelectenerg-198	186	22	section	section	NOUN
fuelectenerg-198	186	23	of	of	ADP
fuelectenerg-198	186	24	the	the	DET
fuelectenerg-198	186	25	table	table	NOUN
fuelectenerg-198	186	26	.	.	PUNCT
fuelectenerg-198	187	1	2	2	NUM
fuelectenerg-198	187	2	)	)	PUNCT
fuelectenerg-198	187	3	.	.	PUNCT
fuelectenerg-198	188	1	in	in	ADP
fuelectenerg-198	188	2	addition	addition	NOUN
fuelectenerg-198	188	3	,	,	PUNCT
fuelectenerg-198	188	4	in	in	ADP
fuelectenerg-198	188	5	[	[	X
fuelectenerg-198	188	6	54	54	NUM
fuelectenerg-198	188	7	]	]	PUNCT
fuelectenerg-198	188	8	we	we	PRON
fuelectenerg-198	188	9	have	have	AUX
fuelectenerg-198	188	10	shown	show	VERB
fuelectenerg-198	188	11	that	that	SCONJ
fuelectenerg-198	188	12	the	the	DET
fuelectenerg-198	188	13	model	model	NOUN
fuelectenerg-198	188	14	described	describe	VERB
fuelectenerg-198	188	15	in	in	ADP
fuelectenerg-198	188	16	this	this	DET
fuelectenerg-198	188	17	work	work	NOUN
fuelectenerg-198	188	18	is	be	AUX
fuelectenerg-198	188	19	also	also	ADV
fuelectenerg-198	188	20	applicable	applicable	ADJ
fuelectenerg-198	188	21	to	to	ADP
fuelectenerg-198	188	22	the	the	DET
fuelectenerg-198	188	23	case	case	NOUN
fuelectenerg-198	188	24	of	of	ADP
fuelectenerg-198	188	25	hfo2	hfo2	PROPN
fuelectenerg-198	188	26	high	high	ADJ
fuelectenerg-198	188	27	-	-	PUNCT
fuelectenerg-198	188	28	k	k	NOUN
fuelectenerg-198	188	29	dielectrics	dielectric	NOUN
fuelectenerg-198	188	30	,	,	PUNCT
fuelectenerg-198	188	31	by	by	ADP
fuelectenerg-198	188	32	fitting	fit	VERB
fuelectenerg-198	188	33	the	the	DET
fuelectenerg-198	188	34	experimental	experimental	ADJ
fuelectenerg-198	188	35	i	i	PROPN
fuelectenerg-198	188	36	-	-	PUNCT
fuelectenerg-198	188	37	v	v	NOUN
fuelectenerg-198	188	38	curves	curve	NOUN
fuelectenerg-198	188	39	obtained	obtain	VERB
fuelectenerg-198	188	40	by	by	ADP
fuelectenerg-198	188	41	other	other	ADJ
fuelectenerg-198	188	42	authors	author	NOUN
fuelectenerg-198	188	43	[	[	X
fuelectenerg-198	188	44	55	55	NUM
fuelectenerg-198	188	45	]	]	PUNCT
fuelectenerg-198	188	46	.	.	PUNCT
fuelectenerg-198	189	1	it	it	PRON
fuelectenerg-198	189	2	is	be	AUX
fuelectenerg-198	189	3	expected	expect	VERB
fuelectenerg-198	189	4	the	the	DET
fuelectenerg-198	189	5	same	same	ADJ
fuelectenerg-198	189	6	or	or	CCONJ
fuelectenerg-198	189	7	slightly	slightly	ADV
fuelectenerg-198	189	8	modified	modify	VERB
fuelectenerg-198	189	9	model	model	NOUN
fuelectenerg-198	189	10	to	to	PART
fuelectenerg-198	189	11	be	be	AUX
fuelectenerg-198	189	12	applicable	applicable	ADJ
fuelectenerg-198	189	13	on	on	ADP
fuelectenerg-198	189	14	various	various	ADJ
fuelectenerg-198	189	15	similar	similar	ADJ
fuelectenerg-198	189	16	structures	structure	NOUN
fuelectenerg-198	189	17	.	.	PUNCT
fuelectenerg-198	190	1	recently	recently	ADV
fuelectenerg-198	190	2	,	,	PUNCT
fuelectenerg-198	190	3	an	an	DET
fuelectenerg-198	190	4	analysis	analysis	NOUN
fuelectenerg-198	190	5	of	of	ADP
fuelectenerg-198	190	6	leakage	leakage	NOUN
fuelectenerg-198	190	7	properties	property	NOUN
fuelectenerg-198	190	8	of	of	ADP
fuelectenerg-198	190	9	al	al	PROPN
fuelectenerg-198	190	10	-	-	PUNCT
fuelectenerg-198	190	11	ta2o5	ta2o5	PROPN
fuelectenerg-198	190	12	/	/	SYM
fuelectenerg-198	190	13	sioxny	sioxny	PROPN
fuelectenerg-198	190	14	-	-	PUNCT
fuelectenerg-198	190	15	si	si	NOUN
fuelectenerg-198	190	16	structures	structure	NOUN
fuelectenerg-198	190	17	based	base	VERB
fuelectenerg-198	190	18	on	on	ADP
fuelectenerg-198	190	19	a	a	DET
fuelectenerg-198	190	20	derived	derive	VERB
fuelectenerg-198	190	21	model	model	NOUN
fuelectenerg-198	190	22	has	have	AUX
fuelectenerg-198	190	23	been	be	AUX
fuelectenerg-198	190	24	published	publish	VERB
fuelectenerg-198	190	25	by	by	ADP
fuelectenerg-198	190	26	other	other	ADJ
fuelectenerg-198	190	27	authors	author	NOUN
fuelectenerg-198	190	28	[	[	X
fuelectenerg-198	190	29	56	56	NUM
fuelectenerg-198	190	30	]	]	PUNCT
fuelectenerg-198	190	31	.	.	PUNCT
fuelectenerg-198	191	1	3.2	3.2	NUM
fuelectenerg-198	191	2	.	.	PUNCT
fuelectenerg-198	192	1	effective	effective	ADJ
fuelectenerg-198	192	2	capacitance	capacitance	NOUN
fuelectenerg-198	192	3	standard	standard	ADJ
fuelectenerg-198	192	4	methods	method	NOUN
fuelectenerg-198	192	5	for	for	ADP
fuelectenerg-198	192	6	characterization	characterization	NOUN
fuelectenerg-198	192	7	of	of	ADP
fuelectenerg-198	192	8	mos	mos	PROPN
fuelectenerg-198	192	9	structures	structure	NOUN
fuelectenerg-198	192	10	include	include	VERB
fuelectenerg-198	192	11	measurement	measurement	NOUN
fuelectenerg-198	192	12	of	of	ADP
fuelectenerg-198	192	13	c	c	NOUN
fuelectenerg-198	192	14	-	-	PUNCT
fuelectenerg-198	192	15	v	v	NOUN
fuelectenerg-198	192	16	and	and	CCONJ
fuelectenerg-198	192	17	g	g	NOUN
fuelectenerg-198	192	18	-	-	PUNCT
fuelectenerg-198	192	19	v	v	NOUN
fuelectenerg-198	192	20	(	(	PUNCT
fuelectenerg-198	192	21	or	or	CCONJ
fuelectenerg-198	192	22	r	r	NOUN
fuelectenerg-198	192	23	-	-	PUNCT
fuelectenerg-198	192	24	v	v	NOUN
fuelectenerg-198	192	25	)	)	PUNCT
fuelectenerg-198	192	26	curves	curve	NOUN
fuelectenerg-198	192	27	in	in	ADP
fuelectenerg-198	192	28	parallel	parallel	ADJ
fuelectenerg-198	192	29	mode	mode	NOUN
fuelectenerg-198	192	30	(	(	PUNCT
fuelectenerg-198	192	31	i.e.	i.e.	X
fuelectenerg-198	192	32	,	,	PUNCT
fuelectenerg-198	192	33	cp	cp	PROPN
fuelectenerg-198	192	34	-	-	PUNCT
fuelectenerg-198	192	35	v	v	NOUN
fuelectenerg-198	192	36	and	and	CCONJ
fuelectenerg-198	192	37	g	g	NOUN
fuelectenerg-198	192	38	-	-	PUNCT
fuelectenerg-198	192	39	v	v	NOUN
fuelectenerg-198	192	40	or	or	CCONJ
fuelectenerg-198	192	41	rp	rp	NOUN
fuelectenerg-198	192	42	-	-	PUNCT
fuelectenerg-198	192	43	v	v	NOUN
fuelectenerg-198	192	44	)	)	PUNCT
fuelectenerg-198	193	1	[	[	X
fuelectenerg-198	193	2	51	51	NUM
fuelectenerg-198	193	3	]	]	PUNCT
fuelectenerg-198	193	4	.	.	PUNCT
fuelectenerg-198	194	1	an	an	DET
fuelectenerg-198	194	2	alternative	alternative	ADJ
fuelectenerg-198	194	3	approach	approach	NOUN
fuelectenerg-198	194	4	is	be	AUX
fuelectenerg-198	194	5	to	to	PART
fuelectenerg-198	194	6	use	use	VERB
fuelectenerg-198	194	7	c	c	NOUN
fuelectenerg-198	194	8	-	-	PUNCT
fuelectenerg-198	194	9	v	v	NOUN
fuelectenerg-198	194	10	and	and	CCONJ
fuelectenerg-198	194	11	r	r	NOUN
fuelectenerg-198	194	12	-	-	PUNCT
fuelectenerg-198	194	13	v	v	NOUN
fuelectenerg-198	194	14	curves	curve	NOUN
fuelectenerg-198	194	15	obtained	obtain	VERB
fuelectenerg-198	194	16	in	in	ADP
fuelectenerg-198	194	17	serial	serial	ADJ
fuelectenerg-198	194	18	mode	mode	NOUN
fuelectenerg-198	194	19	(	(	PUNCT
fuelectenerg-198	194	20	cs	cs	PROPN
fuelectenerg-198	194	21	-	-	ADJ
fuelectenerg-198	194	22	v	v	NOUN
fuelectenerg-198	194	23	and	and	CCONJ
fuelectenerg-198	194	24	rs	rs	NOUN
fuelectenerg-198	194	25	-	-	PUNCT
fuelectenerg-198	194	26	v	v	NOUN
fuelectenerg-198	194	27	)	)	PUNCT
fuelectenerg-198	194	28	.	.	PUNCT
fuelectenerg-198	195	1	our	our	PRON
fuelectenerg-198	195	2	extensive	extensive	ADJ
fuelectenerg-198	195	3	experience	experience	NOUN
fuelectenerg-198	195	4	with	with	ADP
fuelectenerg-198	195	5	metal	metal	NOUN
fuelectenerg-198	195	6	/	/	SYM
fuelectenerg-198	195	7	high	high	ADJ
fuelectenerg-198	195	8	-	-	PUNCT
fuelectenerg-198	195	9	k	k	NOUN
fuelectenerg-198	195	10	/	/	SYM
fuelectenerg-198	195	11	si	si	NOUN
fuelectenerg-198	195	12	structures	structure	NOUN
fuelectenerg-198	195	13	suggests	suggest	VERB
fuelectenerg-198	195	14	that	that	SCONJ
fuelectenerg-198	195	15	better	well	ADJ
fuelectenerg-198	195	16	results	result	NOUN
fuelectenerg-198	195	17	are	be	AUX
fuelectenerg-198	195	18	obtained	obtain	VERB
fuelectenerg-198	195	19	when	when	SCONJ
fuelectenerg-198	195	20	using	use	VERB
fuelectenerg-198	195	21	serial	serial	ADJ
fuelectenerg-198	195	22	mode	mode	NOUN
fuelectenerg-198	195	23	in	in	ADP
fuelectenerg-198	195	24	characterization	characterization	NOUN
fuelectenerg-198	195	25	of	of	ADP
fuelectenerg-198	195	26	capacitance	capacitance	NOUN
fuelectenerg-198	195	27	properties	property	NOUN
fuelectenerg-198	195	28	of	of	ADP
fuelectenerg-198	195	29	the	the	DET
fuelectenerg-198	195	30	considered	consider	VERB
fuelectenerg-198	195	31	structures	structure	NOUN
fuelectenerg-198	195	32	.	.	PUNCT
fuelectenerg-198	196	1	this	this	DET
fuelectenerg-198	196	2	approach	approach	NOUN
fuelectenerg-198	196	3	has	have	AUX
fuelectenerg-198	196	4	been	be	AUX
fuelectenerg-198	196	5	supported	support	VERB
fuelectenerg-198	196	6	by	by	ADP
fuelectenerg-198	196	7	additional	additional	ADJ
fuelectenerg-198	196	8	studies	study	NOUN
fuelectenerg-198	196	9	of	of	ADP
fuelectenerg-198	196	10	the	the	DET
fuelectenerg-198	196	11	ac	ac	PROPN
fuelectenerg-198	196	12	capacitance	capacitance	NOUN
fuelectenerg-198	196	13	and	and	CCONJ
fuelectenerg-198	196	14	resistance	resistance	NOUN
fuelectenerg-198	196	15	measurements	measurement	NOUN
fuelectenerg-198	196	16	at	at	ADP
fuelectenerg-198	196	17	various	various	ADJ
fuelectenerg-198	196	18	frequencies	frequency	NOUN
fuelectenerg-198	196	19	[	[	X
fuelectenerg-198	196	20	57],[58	57],[58	NOUN
fuelectenerg-198	196	21	]	]	PUNCT
fuelectenerg-198	196	22	.	.	PUNCT
fuelectenerg-198	197	1	based	base	VERB
fuelectenerg-198	197	2	on	on	ADP
fuelectenerg-198	197	3	the	the	DET
fuelectenerg-198	197	4	model	model	NOUN
fuelectenerg-198	197	5	described	describe	VERB
fuelectenerg-198	197	6	here	here	ADV
fuelectenerg-198	197	7	an	an	DET
fuelectenerg-198	197	8	equivalent	equivalent	ADJ
fuelectenerg-198	197	9	circuit	circuit	NOUN
fuelectenerg-198	197	10	(	(	PUNCT
fuelectenerg-198	197	11	simplified	simplify	VERB
fuelectenerg-198	197	12	equivalent	equivalent	ADJ
fuelectenerg-198	197	13	circuit	circuit	NOUN
fuelectenerg-198	197	14	of	of	ADP
fuelectenerg-198	197	15	that	that	PRON
fuelectenerg-198	197	16	shown	show	VERB
fuelectenerg-198	197	17	in	in	ADP
fuelectenerg-198	197	18	fig	fig	NOUN
fuelectenerg-198	197	19	.	.	PUNCT
fuelectenerg-198	198	1	5	5	NUM
fuelectenerg-198	198	2	)	)	PUNCT
fuelectenerg-198	198	3	for	for	ADP
fuelectenerg-198	198	4	the	the	DET
fuelectenerg-198	198	5	capacitance	capacitance	NOUN
fuelectenerg-198	198	6	in	in	ADP
fuelectenerg-198	198	7	accumulation	accumulation	NOUN
fuelectenerg-198	198	8	has	have	AUX
fuelectenerg-198	198	9	been	be	AUX
fuelectenerg-198	198	10	constructed	construct	VERB
fuelectenerg-198	198	11	and	and	CCONJ
fuelectenerg-198	198	12	applied	apply	VERB
fuelectenerg-198	198	13	to	to	PART
fuelectenerg-198	198	14	describe	describe	VERB
fuelectenerg-198	198	15	experimental	experimental	ADJ
fuelectenerg-198	198	16	results	result	NOUN
fuelectenerg-198	198	17	for	for	ADP
fuelectenerg-198	198	18	measured	measure	VERB
fuelectenerg-198	198	19	capacitances	capacitance	NOUN
fuelectenerg-198	198	20	and	and	CCONJ
fuelectenerg-198	198	21	resistances	resistance	NOUN
fuelectenerg-198	198	22	as	as	ADP
fuelectenerg-198	198	23	a	a	DET
fuelectenerg-198	198	24	function	function	NOUN
fuelectenerg-198	198	25	of	of	ADP
fuelectenerg-198	198	26	the	the	DET
fuelectenerg-198	198	27	signal	signal	ADJ
fuelectenerg-198	198	28	frequency	frequency	NOUN
fuelectenerg-198	198	29	,	,	PUNCT
fuelectenerg-198	198	30	both	both	CCONJ
fuelectenerg-198	198	31	in	in	ADP
fuelectenerg-198	198	32	parallel	parallel	ADJ
fuelectenerg-198	198	33	and	and	CCONJ
fuelectenerg-198	198	34	serial	serial	ADJ
fuelectenerg-198	198	35	mode	mode	NOUN
fuelectenerg-198	199	1	[	[	X
fuelectenerg-198	199	2	57	57	NUM
fuelectenerg-198	199	3	]	]	PUNCT
fuelectenerg-198	199	4	.	.	PUNCT
fuelectenerg-198	200	1	impedance	impedance	NOUN
fuelectenerg-198	200	2	of	of	ADP
fuelectenerg-198	200	3	the	the	DET
fuelectenerg-198	200	4	considered	consider	VERB
fuelectenerg-198	200	5	equivalent	equivalent	ADJ
fuelectenerg-198	200	6	circuit	circuit	NOUN
fuelectenerg-198	200	7	(	(	PUNCT
fuelectenerg-198	200	8	z	z	NOUN
fuelectenerg-198	200	9	)	)	PUNCT
fuelectenerg-198	200	10	is	be	AUX
fuelectenerg-198	200	11	given	give	VERB
fuelectenerg-198	200	12	with	with	ADP
fuelectenerg-198	200	13	the	the	DET
fuelectenerg-198	200	14	following	follow	VERB
fuelectenerg-198	200	15	expression	expression	NOUN
fuelectenerg-198	200	16	:	:	PUNCT
fuelectenerg-198	200	17	hk	hk	PROPN
fuelectenerg-198	200	18	if	if	SCONJ
fuelectenerg-198	200	19	l2	l2	PROPN
fuelectenerg-198	200	20	2	2	NUM
fuelectenerg-198	200	21	hk	hk	PROPN
fuelectenerg-198	200	22	hk	hk	PROPN
fuelectenerg-198	200	23	if	if	SCONJ
fuelectenerg-198	200	24	if	if	SCONJ
fuelectenerg-198	200	25	hk	hk	PROPN
fuelectenerg-198	200	26	if	if	SCONJ
fuelectenerg-198	200	27	2	2	NUM
fuelectenerg-198	200	28	2	2	NUM
fuelectenerg-198	200	29	hk	hk	NOUN
fuelectenerg-198	200	30	hk	hk	PROPN
fuelectenerg-198	200	31	if	if	SCONJ
fuelectenerg-198	200	32	if	if	SCONJ
fuelectenerg-198	200	33	1	1	NUM
fuelectenerg-198	200	34	(	(	PUNCT
fuelectenerg-198	200	35	2	2	NUM
fuelectenerg-198	200	36	)	)	PUNCT
fuelectenerg-198	200	37	1	1	NUM
fuelectenerg-198	200	38	(	(	PUNCT
fuelectenerg-198	200	39	2	2	NUM
fuelectenerg-198	200	40	)	)	PUNCT
fuelectenerg-198	200	41	1	1	NUM
fuelectenerg-198	200	42	11	11	NUM
fuelectenerg-198	200	43	2	2	NUM
fuelectenerg-198	200	44	1	1	NUM
fuelectenerg-198	200	45	1	1	NUM
fuelectenerg-198	200	46	(	(	PUNCT
fuelectenerg-198	200	47	2	2	NUM
fuelectenerg-198	200	48	)	)	PUNCT
fuelectenerg-198	200	49	1	1	NUM
fuelectenerg-198	200	50	1	1	NUM
fuelectenerg-198	200	51	(	(	PUNCT
fuelectenerg-198	200	52	2	2	NUM
fuelectenerg-198	200	53	)	)	PUNCT
fuelectenerg-198	200	54	r	r	NOUN
fuelectenerg-198	200	55	r	r	NOUN
fuelectenerg-198	200	56	z	z	NOUN
fuelectenerg-198	200	57	r	r	NOUN
fuelectenerg-198	200	58	fc	fc	NOUN
fuelectenerg-198	200	59	r	r	NOUN
fuelectenerg-198	200	60	fc	fc	PROPN
fuelectenerg-198	200	61	r	r	NOUN
fuelectenerg-198	200	62	c	c	NOUN
fuelectenerg-198	200	63	c	c	NOUN
fuelectenerg-198	201	1	i	i	PRON
fuelectenerg-198	201	2	f	f	NOUN
fuelectenerg-198	201	3	fc	fc	PROPN
fuelectenerg-198	201	4	r	r	NOUN
fuelectenerg-198	201	5	fc	fc	PROPN
fuelectenerg-198	201	6	r	r	PROPN
fuelectenerg-198	201	7			PROPN
fuelectenerg-198	201	8			PROPN
fuelectenerg-198	201	9			PROPN
fuelectenerg-198	201	10			PROPN
fuelectenerg-198	201	11			PROPN
fuelectenerg-198	201	12			PROPN
fuelectenerg-198	201	13			PROPN
fuelectenerg-198	201	14			PUNCT
fuelectenerg-198	201	15			VERB
fuelectenerg-198	201	16			VERB
fuelectenerg-198	202	1			NOUN
fuelectenerg-198	202	2			PROPN
fuelectenerg-198	202	3			PROPN
fuelectenerg-198	202	4			PROPN
fuelectenerg-198	202	5			PROPN
fuelectenerg-198	202	6			PUNCT
fuelectenerg-198	202	7			NUM
fuelectenerg-198	202	8			NOUN
fuelectenerg-198	202	9	,	,	PUNCT
fuelectenerg-198	202	10	(	(	PUNCT
fuelectenerg-198	202	11	14	14	NUM
fuelectenerg-198	202	12	)	)	PUNCT
fuelectenerg-198	202	13	where	where	SCONJ
fuelectenerg-198	202	14	f	f	PROPN
fuelectenerg-198	202	15	is	be	AUX
fuelectenerg-198	202	16	the	the	DET
fuelectenerg-198	202	17	measurement	measurement	NOUN
fuelectenerg-198	202	18	signal	signal	PROPN
fuelectenerg-198	202	19	frequency	frequency	NOUN
fuelectenerg-198	203	1	.	.	PUNCT
fuelectenerg-198	204	1	for	for	ADP
fuelectenerg-198	204	2	measurements	measurement	NOUN
fuelectenerg-198	204	3	in	in	ADP
fuelectenerg-198	204	4	serial	serial	ADJ
fuelectenerg-198	204	5	mode	mode	NOUN
fuelectenerg-198	204	6	(	(	PUNCT
fuelectenerg-198	204	7	at	at	ADP
fuelectenerg-198	204	8	given	give	VERB
fuelectenerg-198	204	9	gate	gate	NOUN
fuelectenerg-198	204	10	voltage	voltage	NOUN
fuelectenerg-198	204	11	v	v	NOUN
fuelectenerg-198	204	12	in	in	ADP
fuelectenerg-198	204	13	accumulation	accumulation	NOUN
fuelectenerg-198	204	14	)	)	PUNCT
fuelectenerg-198	204	15	,	,	PUNCT
fuelectenerg-198	204	16	corresponding	correspond	VERB
fuelectenerg-198	204	17	effective	effective	ADJ
fuelectenerg-198	204	18	serial	serial	ADJ
fuelectenerg-198	204	19	capacitance	capacitance	NOUN
fuelectenerg-198	204	20	(	(	PUNCT
fuelectenerg-198	204	21	cs	cs	PROPN
fuelectenerg-198	204	22	)	)	PUNCT
fuelectenerg-198	204	23	and	and	CCONJ
fuelectenerg-198	204	24	resistance	resistance	NOUN
fuelectenerg-198	204	25	(	(	PUNCT
fuelectenerg-198	204	26	rs	rs	NOUN
fuelectenerg-198	204	27	)	)	PUNCT
fuelectenerg-198	204	28	are	be	AUX
fuelectenerg-198	204	29	frequency	frequency	NOUN
fuelectenerg-198	204	30	dependent	dependent	ADJ
fuelectenerg-198	204	31	and	and	CCONJ
fuelectenerg-198	204	32	given	give	VERB
fuelectenerg-198	204	33	with	with	ADP
fuelectenerg-198	204	34	following	follow	VERB
fuelectenerg-198	204	35	expressions	expression	NOUN
fuelectenerg-198	204	36	:	:	PUNCT
fuelectenerg-198	204	37	270	270	NUM
fuelectenerg-198	204	38	n.	n.	NOUN
fuelectenerg-198	204	39	novkovski	novkovski	NOUN
fuelectenerg-198	204	40	1	1	NUM
fuelectenerg-198	204	41	hk	hk	NOUN
fuelectenerg-198	204	42	if	if	SCONJ
fuelectenerg-198	204	43	s	s	PROPN
fuelectenerg-198	204	44	2	2	NUM
fuelectenerg-198	204	45	2	2	NUM
fuelectenerg-198	204	46	hk	hk	NOUN
fuelectenerg-198	204	47	hk	hk	PROPN
fuelectenerg-198	204	48	if	if	SCONJ
fuelectenerg-198	204	49	if	if	SCONJ
fuelectenerg-198	204	50	1	1	NUM
fuelectenerg-198	204	51	1	1	NUM
fuelectenerg-198	204	52	(	(	PUNCT
fuelectenerg-198	204	53	)	)	PUNCT
fuelectenerg-198	204	54	1	1	NUM
fuelectenerg-198	204	55	1	1	NUM
fuelectenerg-198	204	56	(	(	PUNCT
fuelectenerg-198	204	57	2	2	NUM
fuelectenerg-198	204	58	(	(	PUNCT
fuelectenerg-198	204	59	)	)	PUNCT
fuelectenerg-198	204	60	)	)	PUNCT
fuelectenerg-198	204	61	1	1	NUM
fuelectenerg-198	204	62	1	1	NUM
fuelectenerg-198	204	63	(	(	PUNCT
fuelectenerg-198	204	64	2	2	NUM
fuelectenerg-198	204	65	(	(	PUNCT
fuelectenerg-198	204	66	)	)	PUNCT
fuelectenerg-198	204	67	)	)	PUNCT
fuelectenerg-198	205	1	c	c	NOUN
fuelectenerg-198	206	1	c	c	NOUN
fuelectenerg-198	206	2	c	c	NOUN
fuelectenerg-198	206	3	f	f	PROPN
fuelectenerg-198	206	4	fc	fc	PROPN
fuelectenerg-198	206	5	r	r	PROPN
fuelectenerg-198	206	6	v	v	NUM
fuelectenerg-198	206	7	fc	fc	NOUN
fuelectenerg-198	206	8	r	r	NOUN
fuelectenerg-198	206	9	v	v	NOUN
fuelectenerg-198	206	10			ADP
fuelectenerg-198	206	11			PROPN
fuelectenerg-198	206	12			NOUN
fuelectenerg-198	206	13			NOUN
fuelectenerg-198	206	14			PROPN
fuelectenerg-198	206	15			PROPN
fuelectenerg-198	206	16			PROPN
fuelectenerg-198	206	17			PUNCT
fuelectenerg-198	206	18			NUM
fuelectenerg-198	206	19			NOUN
fuelectenerg-198	206	20	(	(	PUNCT
fuelectenerg-198	206	21	15	15	NUM
fuelectenerg-198	206	22	)	)	PUNCT
fuelectenerg-198	206	23	and	and	CCONJ
fuelectenerg-198	206	24	hk	hk	NOUN
fuelectenerg-198	206	25	if	if	SCONJ
fuelectenerg-198	206	26	s	s	PRON
fuelectenerg-198	206	27	l2	l2	VERB
fuelectenerg-198	206	28	2	2	NUM
fuelectenerg-198	206	29	hk	hk	PROPN
fuelectenerg-198	206	30	hk	hk	PROPN
fuelectenerg-198	207	1	if	if	SCONJ
fuelectenerg-198	207	2	if	if	SCONJ
fuelectenerg-198	207	3	(	(	PUNCT
fuelectenerg-198	207	4	)	)	PUNCT
fuelectenerg-198	207	5	1	1	NUM
fuelectenerg-198	207	6	(	(	PUNCT
fuelectenerg-198	207	7	2	2	NUM
fuelectenerg-198	207	8	(	(	PUNCT
fuelectenerg-198	207	9	)	)	PUNCT
fuelectenerg-198	207	10	)	)	PUNCT
fuelectenerg-198	207	11	1	1	NUM
fuelectenerg-198	207	12	(	(	PUNCT
fuelectenerg-198	207	13	2	2	NUM
fuelectenerg-198	207	14	(	(	PUNCT
fuelectenerg-198	207	15	)	)	PUNCT
fuelectenerg-198	207	16	)	)	PUNCT
fuelectenerg-198	208	1	r	r	NOUN
fuelectenerg-198	208	2	r	r	NOUN
fuelectenerg-198	208	3	r	r	NOUN
fuelectenerg-198	208	4	f	f	NOUN
fuelectenerg-198	208	5	r	r	NOUN
fuelectenerg-198	208	6	fc	fc	NOUN
fuelectenerg-198	208	7	r	r	NOUN
fuelectenerg-198	208	8	v	v	NOUN
fuelectenerg-198	208	9	fc	fc	NOUN
fuelectenerg-198	208	10	r	r	NOUN
fuelectenerg-198	208	11	v	v	NOUN
fuelectenerg-198	208	12			PROPN
fuelectenerg-198	208	13			PROPN
fuelectenerg-198	208	14			PROPN
fuelectenerg-198	208	15			PUNCT
fuelectenerg-198	208	16			PUNCT
fuelectenerg-198	208	17			ADJ
fuelectenerg-198	208	18	.	.	PUNCT
fuelectenerg-198	209	1	(	(	PUNCT
fuelectenerg-198	209	2	16	16	NUM
fuelectenerg-198	209	3	)	)	PUNCT
fuelectenerg-198	209	4	in	in	ADP
fuelectenerg-198	209	5	[	[	X
fuelectenerg-198	209	6	57	57	NUM
fuelectenerg-198	209	7	]	]	X
fuelectenerg-198	209	8	excellent	excellent	ADJ
fuelectenerg-198	209	9	fits	fit	VERB
fuelectenerg-198	209	10	to	to	ADP
fuelectenerg-198	209	11	the	the	DET
fuelectenerg-198	209	12	experimental	experimental	ADJ
fuelectenerg-198	209	13	results	result	NOUN
fuelectenerg-198	209	14	for	for	ADP
fuelectenerg-198	209	15	al	al	PROPN
fuelectenerg-198	209	16	-	-	PUNCT
fuelectenerg-198	209	17	ta2o5	ta2o5	PROPN
fuelectenerg-198	209	18	/	/	SYM
fuelectenerg-198	209	19	sio2	sio2	NOUN
fuelectenerg-198	209	20	structures	structure	NOUN
fuelectenerg-198	209	21	have	have	AUX
fuelectenerg-198	209	22	been	be	AUX
fuelectenerg-198	209	23	obtained	obtain	VERB
fuelectenerg-198	209	24	when	when	SCONJ
fuelectenerg-198	209	25	using	use	VERB
fuelectenerg-198	209	26	expressions	expression	NOUN
fuelectenerg-198	209	27	(	(	PUNCT
fuelectenerg-198	209	28	15	15	NUM
fuelectenerg-198	209	29	)	)	PUNCT
fuelectenerg-198	209	30	and	and	CCONJ
fuelectenerg-198	209	31	(	(	PUNCT
fuelectenerg-198	209	32	16	16	NUM
fuelectenerg-198	209	33	)	)	PUNCT
fuelectenerg-198	209	34	.	.	PUNCT
fuelectenerg-198	210	1	detailed	detailed	ADJ
fuelectenerg-198	210	2	analysis	analysis	NOUN
fuelectenerg-198	210	3	for	for	ADP
fuelectenerg-198	210	4	the	the	DET
fuelectenerg-198	210	5	c	c	NOUN
fuelectenerg-198	210	6	-	-	PUNCT
fuelectenerg-198	210	7	v	v	NOUN
fuelectenerg-198	210	8	,	,	PUNCT
fuelectenerg-198	210	9	r	r	NOUN
fuelectenerg-198	210	10	-	-	PUNCT
fuelectenerg-198	210	11	v	v	NOUN
fuelectenerg-198	210	12	and	and	CCONJ
fuelectenerg-198	210	13	c	c	NOUN
fuelectenerg-198	210	14	-	-	PUNCT
fuelectenerg-198	210	15	v	v	NOUN
fuelectenerg-198	210	16	curves	curve	NOUN
fuelectenerg-198	210	17	for	for	ADP
fuelectenerg-198	210	18	metal(al	metal(al	NOUN
fuelectenerg-198	210	19	,	,	PUNCT
fuelectenerg-198	210	20	w	w	NOUN
fuelectenerg-198	210	21	,	,	PUNCT
fuelectenerg-198	210	22	au)-ta2o5	au)-ta2o5	PRON
fuelectenerg-198	210	23	/	/	SYM
fuelectenerg-198	210	24	sio2	sio2	PROPN
fuelectenerg-198	210	25	structures	structure	NOUN
fuelectenerg-198	210	26	,	,	PUNCT
fuelectenerg-198	210	27	both	both	CCONJ
fuelectenerg-198	210	28	in	in	ADP
fuelectenerg-198	210	29	parallel	parallel	ADJ
fuelectenerg-198	210	30	and	and	CCONJ
fuelectenerg-198	210	31	serial	serial	ADJ
fuelectenerg-198	210	32	mode	mode	NOUN
fuelectenerg-198	210	33	,	,	PUNCT
fuelectenerg-198	210	34	have	have	AUX
fuelectenerg-198	210	35	been	be	AUX
fuelectenerg-198	210	36	reported	report	VERB
fuelectenerg-198	210	37	in	in	ADP
fuelectenerg-198	210	38	[	[	X
fuelectenerg-198	210	39	51	51	NUM
fuelectenerg-198	210	40	]	]	PUNCT
fuelectenerg-198	210	41	.	.	PUNCT
fuelectenerg-198	211	1	all	all	DET
fuelectenerg-198	211	2	the	the	DET
fuelectenerg-198	211	3	results	result	NOUN
fuelectenerg-198	211	4	obtained	obtain	VERB
fuelectenerg-198	211	5	are	be	AUX
fuelectenerg-198	211	6	consistent	consistent	ADJ
fuelectenerg-198	211	7	with	with	ADP
fuelectenerg-198	211	8	the	the	DET
fuelectenerg-198	211	9	model	model	NOUN
fuelectenerg-198	211	10	described	describe	VERB
fuelectenerg-198	211	11	in	in	ADP
fuelectenerg-198	211	12	this	this	DET
fuelectenerg-198	211	13	work	work	NOUN
fuelectenerg-198	211	14	.	.	PUNCT
fuelectenerg-198	212	1	3.3	3.3	NUM
fuelectenerg-198	212	2	.	.	PUNCT
fuelectenerg-198	212	3	stress	stress	NOUN
fuelectenerg-198	212	4	-	-	PUNCT
fuelectenerg-198	212	5	induced	induce	VERB
fuelectenerg-198	212	6	leakage	leakage	NOUN
fuelectenerg-198	212	7	currents	current	NOUN
fuelectenerg-198	212	8	in	in	ADP
fuelectenerg-198	212	9	addition	addition	NOUN
fuelectenerg-198	212	10	to	to	ADP
fuelectenerg-198	212	11	the	the	DET
fuelectenerg-198	212	12	description	description	NOUN
fuelectenerg-198	212	13	of	of	ADP
fuelectenerg-198	212	14	the	the	DET
fuelectenerg-198	212	15	leakage	leakage	NOUN
fuelectenerg-198	212	16	currents	current	NOUN
fuelectenerg-198	212	17	of	of	ADP
fuelectenerg-198	212	18	fresh	fresh	ADJ
fuelectenerg-198	212	19	structures	structure	NOUN
fuelectenerg-198	212	20	,	,	PUNCT
fuelectenerg-198	212	21	this	this	DET
fuelectenerg-198	212	22	model	model	NOUN
fuelectenerg-198	212	23	has	have	AUX
fuelectenerg-198	212	24	been	be	AUX
fuelectenerg-198	212	25	successfully	successfully	ADV
fuelectenerg-198	212	26	applied	apply	VERB
fuelectenerg-198	212	27	to	to	ADP
fuelectenerg-198	212	28	the	the	DET
fuelectenerg-198	212	29	description	description	NOUN
fuelectenerg-198	212	30	of	of	ADP
fuelectenerg-198	212	31	the	the	DET
fuelectenerg-198	212	32	stress	stress	NOUN
fuelectenerg-198	212	33	-	-	PUNCT
fuelectenerg-198	212	34	induced	induce	VERB
fuelectenerg-198	212	35	leakage	leakage	NOUN
fuelectenerg-198	212	36	currents	current	NOUN
fuelectenerg-198	212	37	.	.	PUNCT
fuelectenerg-198	213	1	we	we	PRON
fuelectenerg-198	213	2	dominantly	dominantly	ADV
fuelectenerg-198	213	3	studied	study	VERB
fuelectenerg-198	213	4	the	the	DET
fuelectenerg-198	213	5	case	case	NOUN
fuelectenerg-198	213	6	of	of	ADP
fuelectenerg-198	213	7	constant	constant	ADJ
fuelectenerg-198	213	8	current	current	ADJ
fuelectenerg-198	213	9	stress	stress	NOUN
fuelectenerg-198	213	10	.	.	PUNCT
fuelectenerg-198	214	1	we	we	PRON
fuelectenerg-198	214	2	have	have	AUX
fuelectenerg-198	214	3	shown	show	VERB
fuelectenerg-198	214	4	that	that	SCONJ
fuelectenerg-198	214	5	i	i	PROPN
fuelectenerg-198	214	6	-	-	PUNCT
fuelectenerg-198	214	7	v	v	PROPN
fuelectenerg-198	214	8	characteristics	characteristic	NOUN
fuelectenerg-198	214	9	of	of	ADP
fuelectenerg-198	214	10	stressed	stress	VERB
fuelectenerg-198	214	11	al	al	PROPN
fuelectenerg-198	214	12	-	-	PUNCT
fuelectenerg-198	214	13	ta2o5	ta2o5	PROPN
fuelectenerg-198	214	14	/	/	SYM
fuelectenerg-198	214	15	sio2	sio2	NOUN
fuelectenerg-198	214	16	structures	structure	NOUN
fuelectenerg-198	214	17	can	can	AUX
fuelectenerg-198	214	18	be	be	AUX
fuelectenerg-198	214	19	very	very	ADV
fuelectenerg-198	214	20	well	well	ADV
fuelectenerg-198	214	21	described	describe	VERB
fuelectenerg-198	214	22	by	by	ADP
fuelectenerg-198	214	23	our	our	PRON
fuelectenerg-198	214	24	model	model	NOUN
fuelectenerg-198	214	25	[	[	X
fuelectenerg-198	214	26	59	59	NUM
fuelectenerg-198	214	27	]	]	PUNCT
fuelectenerg-198	214	28	.	.	PUNCT
fuelectenerg-198	215	1	increase	increase	NOUN
fuelectenerg-198	215	2	of	of	ADP
fuelectenerg-198	215	3	the	the	DET
fuelectenerg-198	215	4	leakage	leakage	NOUN
fuelectenerg-198	215	5	currents	current	NOUN
fuelectenerg-198	215	6	with	with	ADP
fuelectenerg-198	215	7	the	the	DET
fuelectenerg-198	215	8	stress	stress	NOUN
fuelectenerg-198	215	9	has	have	AUX
fuelectenerg-198	215	10	been	be	AUX
fuelectenerg-198	215	11	attributed	attribute	VERB
fuelectenerg-198	215	12	to	to	ADP
fuelectenerg-198	215	13	the	the	DET
fuelectenerg-198	215	14	degradation	degradation	NOUN
fuelectenerg-198	215	15	of	of	ADP
fuelectenerg-198	215	16	the	the	DET
fuelectenerg-198	215	17	interfacial	interfacial	ADJ
fuelectenerg-198	215	18	layer	layer	NOUN
fuelectenerg-198	215	19	by	by	ADP
fuelectenerg-198	215	20	creation	creation	NOUN
fuelectenerg-198	215	21	of	of	ADP
fuelectenerg-198	215	22	high	high	ADJ
fuelectenerg-198	215	23	density	density	NOUN
fuelectenerg-198	215	24	of	of	ADP
fuelectenerg-198	215	25	defects	defect	NOUN
fuelectenerg-198	215	26	in	in	ADP
fuelectenerg-198	215	27	a	a	DET
fuelectenerg-198	215	28	part	part	NOUN
fuelectenerg-198	215	29	of	of	ADP
fuelectenerg-198	215	30	it	it	PRON
fuelectenerg-198	215	31	.	.	PUNCT
fuelectenerg-198	216	1	this	this	DET
fuelectenerg-198	216	2	part	part	NOUN
fuelectenerg-198	216	3	can	can	AUX
fuelectenerg-198	216	4	be	be	AUX
fuelectenerg-198	216	5	degraded	degrade	VERB
fuelectenerg-198	216	6	to	to	ADP
fuelectenerg-198	216	7	the	the	DET
fuelectenerg-198	216	8	point	point	NOUN
fuelectenerg-198	216	9	where	where	SCONJ
fuelectenerg-198	216	10	it	it	PRON
fuelectenerg-198	216	11	can	can	AUX
fuelectenerg-198	216	12	be	be	AUX
fuelectenerg-198	216	13	regarded	regard	VERB
fuelectenerg-198	216	14	as	as	ADP
fuelectenerg-198	216	15	a	a	DET
fuelectenerg-198	216	16	conductive	conductive	ADJ
fuelectenerg-198	216	17	material	material	NOUN
fuelectenerg-198	216	18	where	where	SCONJ
fuelectenerg-198	216	19	conduction	conduction	NOUN
fuelectenerg-198	216	20	occurs	occur	VERB
fuelectenerg-198	216	21	through	through	ADP
fuelectenerg-198	216	22	percolation	percolation	NOUN
fuelectenerg-198	216	23	paths	path	NOUN
fuelectenerg-198	216	24	[	[	X
fuelectenerg-198	216	25	59]-[61	59]-[61	X
fuelectenerg-198	216	26	]	]	X
fuelectenerg-198	216	27	.	.	PUNCT
fuelectenerg-198	217	1	4	4	X
fuelectenerg-198	217	2	.	.	X
fuelectenerg-198	217	3	conclusions	conclusion	NOUN
fuelectenerg-198	217	4	comprehensive	comprehensive	ADJ
fuelectenerg-198	217	5	physical	physical	ADJ
fuelectenerg-198	217	6	model	model	NOUN
fuelectenerg-198	217	7	for	for	ADP
fuelectenerg-198	217	8	describing	describe	VERB
fuelectenerg-198	217	9	electrical	electrical	ADJ
fuelectenerg-198	217	10	and	and	CCONJ
fuelectenerg-198	217	11	dielectric	dielectric	ADJ
fuelectenerg-198	217	12	properties	property	NOUN
fuelectenerg-198	217	13	of	of	ADP
fuelectenerg-198	217	14	mos	mos	PROPN
fuelectenerg-198	217	15	capacitors	capacitor	NOUN
fuelectenerg-198	217	16	containing	contain	VERB
fuelectenerg-198	217	17	high	high	ADJ
fuelectenerg-198	217	18	-	-	PUNCT
fuelectenerg-198	217	19	k/(sio2,sioxny	k/(sio2,sioxny	NOUN
fuelectenerg-198	217	20	)	)	PUNCT
fuelectenerg-198	217	21	dielectric	dielectric	ADJ
fuelectenerg-198	217	22	stack	stack	NOUN
fuelectenerg-198	217	23	has	have	AUX
fuelectenerg-198	217	24	been	be	AUX
fuelectenerg-198	217	25	described	describe	VERB
fuelectenerg-198	217	26	in	in	ADP
fuelectenerg-198	217	27	details	detail	NOUN
fuelectenerg-198	217	28	.	.	PUNCT
fuelectenerg-198	218	1	corresponding	correspond	VERB
fuelectenerg-198	218	2	equivalent	equivalent	ADJ
fuelectenerg-198	218	3	circuit	circuit	NOUN
fuelectenerg-198	218	4	has	have	AUX
fuelectenerg-198	218	5	been	be	AUX
fuelectenerg-198	218	6	constructed	construct	VERB
fuelectenerg-198	218	7	and	and	CCONJ
fuelectenerg-198	218	8	displayed	display	VERB
fuelectenerg-198	218	9	.	.	PUNCT
fuelectenerg-198	219	1	the	the	DET
fuelectenerg-198	219	2	proposed	propose	VERB
fuelectenerg-198	219	3	model	model	NOUN
fuelectenerg-198	219	4	describes	describe	VERB
fuelectenerg-198	219	5	very	very	ADV
fuelectenerg-198	219	6	well	well	ADV
fuelectenerg-198	219	7	mos	mos	ADJ
fuelectenerg-198	219	8	structures	structure	NOUN
fuelectenerg-198	219	9	containing	contain	VERB
fuelectenerg-198	219	10	ta2o5	ta2o5	PROPN
fuelectenerg-198	219	11	based	base	VERB
fuelectenerg-198	219	12	dielectric	dielectric	ADJ
fuelectenerg-198	219	13	layers	layer	NOUN
fuelectenerg-198	219	14	,	,	PUNCT
fuelectenerg-198	219	15	both	both	PRON
fuelectenerg-198	219	16	obtained	obtain	VERB
fuelectenerg-198	219	17	with	with	ADP
fuelectenerg-198	219	18	different	different	ADJ
fuelectenerg-198	219	19	technological	technological	ADJ
fuelectenerg-198	219	20	procedures	procedure	NOUN
fuelectenerg-198	219	21	and	and	CCONJ
fuelectenerg-198	219	22	with	with	ADP
fuelectenerg-198	219	23	different	different	ADJ
fuelectenerg-198	219	24	doping	doping	NOUN
fuelectenerg-198	219	25	.	.	PUNCT
fuelectenerg-198	220	1	it	it	PRON
fuelectenerg-198	220	2	has	have	AUX
fuelectenerg-198	220	3	been	be	AUX
fuelectenerg-198	220	4	also	also	ADV
fuelectenerg-198	220	5	shown	show	VERB
fuelectenerg-198	220	6	that	that	SCONJ
fuelectenerg-198	220	7	the	the	DET
fuelectenerg-198	220	8	model	model	NOUN
fuelectenerg-198	220	9	can	can	AUX
fuelectenerg-198	220	10	be	be	AUX
fuelectenerg-198	220	11	used	use	VERB
fuelectenerg-198	220	12	for	for	ADP
fuelectenerg-198	220	13	other	other	ADJ
fuelectenerg-198	220	14	high	high	ADJ
fuelectenerg-198	220	15	-	-	PUNCT
fuelectenerg-198	220	16	k	k	NOUN
fuelectenerg-198	220	17	dielectrics	dielectric	NOUN
fuelectenerg-198	220	18	such	such	ADJ
fuelectenerg-198	220	19	as	as	ADP
fuelectenerg-198	220	20	hfo2	hfo2	NOUN
fuelectenerg-198	220	21	.	.	PUNCT
fuelectenerg-198	221	1	based	base	VERB
fuelectenerg-198	221	2	on	on	ADP
fuelectenerg-198	221	3	the	the	DET
fuelectenerg-198	221	4	model	model	NOUN
fuelectenerg-198	221	5	,	,	PUNCT
fuelectenerg-198	221	6	degradation	degradation	NOUN
fuelectenerg-198	221	7	of	of	ADP
fuelectenerg-198	221	8	the	the	DET
fuelectenerg-198	221	9	dielectric	dielectric	ADJ
fuelectenerg-198	221	10	properties	property	NOUN
fuelectenerg-198	221	11	of	of	ADP
fuelectenerg-198	221	12	the	the	DET
fuelectenerg-198	221	13	high	high	ADJ
fuelectenerg-198	221	14	-	-	PUNCT
fuelectenerg-198	221	15	k	k	NOUN
fuelectenerg-198	221	16	dielectric	dielectric	ADJ
fuelectenerg-198	221	17	layer	layer	NOUN
fuelectenerg-198	221	18	induced	induce	VERB
fuelectenerg-198	221	19	by	by	ADP
fuelectenerg-198	221	20	a	a	DET
fuelectenerg-198	221	21	reactive	reactive	ADJ
fuelectenerg-198	221	22	metal	metal	NOUN
fuelectenerg-198	221	23	gate	gate	NOUN
fuelectenerg-198	221	24	,	,	PUNCT
fuelectenerg-198	221	25	such	such	ADJ
fuelectenerg-198	221	26	as	as	ADP
fuelectenerg-198	221	27	al	al	PROPN
fuelectenerg-198	221	28	,	,	PUNCT
fuelectenerg-198	221	29	can	can	AUX
fuelectenerg-198	221	30	be	be	AUX
fuelectenerg-198	221	31	clearly	clearly	ADV
fuelectenerg-198	221	32	distinguished	distinguish	VERB
fuelectenerg-198	221	33	from	from	ADP
fuelectenerg-198	221	34	other	other	ADJ
fuelectenerg-198	221	35	effects	effect	NOUN
fuelectenerg-198	221	36	.	.	PUNCT
fuelectenerg-198	222	1	the	the	DET
fuelectenerg-198	222	2	model	model	NOUN
fuelectenerg-198	222	3	is	be	AUX
fuelectenerg-198	222	4	applicable	applicable	ADJ
fuelectenerg-198	222	5	on	on	ADP
fuelectenerg-198	222	6	fresh	fresh	ADJ
fuelectenerg-198	222	7	as	as	ADV
fuelectenerg-198	222	8	well	well	ADV
fuelectenerg-198	222	9	on	on	ADP
fuelectenerg-198	222	10	high	high	ADJ
fuelectenerg-198	222	11	-	-	PUNCT
fuelectenerg-198	222	12	field	field	NOUN
fuelectenerg-198	222	13	/	/	SYM
fuelectenerg-198	222	14	current	current	ADJ
fuelectenerg-198	222	15	stressed	stress	VERB
fuelectenerg-198	222	16	samples	sample	NOUN
fuelectenerg-198	222	17	,	,	PUNCT
fuelectenerg-198	222	18	thus	thus	ADV
fuelectenerg-198	222	19	allowing	allow	VERB
fuelectenerg-198	222	20	analyzing	analyze	VERB
fuelectenerg-198	222	21	the	the	DET
fuelectenerg-198	222	22	stress	stress	NOUN
fuelectenerg-198	222	23	-	-	PUNCT
fuelectenerg-198	222	24	induced	induce	VERB
fuelectenerg-198	222	25	leakage	leakage	NOUN
fuelectenerg-198	222	26	currents	current	NOUN
fuelectenerg-198	222	27	at	at	ADP
fuelectenerg-198	222	28	medium	medium	ADJ
fuelectenerg-198	222	29	fields	field	NOUN
fuelectenerg-198	222	30	.	.	PUNCT
fuelectenerg-198	223	1	finer	fine	ADJ
fuelectenerg-198	223	2	details	detail	NOUN
fuelectenerg-198	223	3	of	of	ADP
fuelectenerg-198	223	4	the	the	DET
fuelectenerg-198	223	5	effect	effect	NOUN
fuelectenerg-198	223	6	of	of	ADP
fuelectenerg-198	223	7	various	various	ADJ
fuelectenerg-198	223	8	technological	technological	ADJ
fuelectenerg-198	223	9	processes	process	NOUN
fuelectenerg-198	223	10	on	on	ADP
fuelectenerg-198	223	11	the	the	DET
fuelectenerg-198	223	12	electrical	electrical	ADJ
fuelectenerg-198	223	13	and	and	CCONJ
fuelectenerg-198	223	14	dielectric	dielectric	ADJ
fuelectenerg-198	223	15	properties	property	NOUN
fuelectenerg-198	223	16	of	of	ADP
fuelectenerg-198	223	17	the	the	DET
fuelectenerg-198	223	18	considered	consider	VERB
fuelectenerg-198	223	19	structures	structure	NOUN
fuelectenerg-198	223	20	can	can	AUX
fuelectenerg-198	223	21	be	be	AUX
fuelectenerg-198	223	22	extracted	extract	VERB
fuelectenerg-198	223	23	using	use	VERB
fuelectenerg-198	223	24	the	the	DET
fuelectenerg-198	223	25	model	model	NOUN
fuelectenerg-198	223	26	.	.	PUNCT
fuelectenerg-198	224	1	acknowledgement	acknowledgement	NOUN
fuelectenerg-198	224	2	:	:	PUNCT
fuelectenerg-198	224	3	this	this	DET
fuelectenerg-198	224	4	work	work	NOUN
fuelectenerg-198	224	5	was	be	AUX
fuelectenerg-198	224	6	supported	support	VERB
fuelectenerg-198	224	7	by	by	ADP
fuelectenerg-198	224	8	macedonian	macedonian	PROPN
fuelectenerg-198	224	9	ministry	ministry	PROPN
fuelectenerg-198	224	10	of	of	ADP
fuelectenerg-198	224	11	education	education	PROPN
fuelectenerg-198	224	12	and	and	CCONJ
fuelectenerg-198	224	13	sciences	science	NOUN
fuelectenerg-198	224	14	under	under	ADP
fuelectenerg-198	224	15	contract	contract	NOUN
fuelectenerg-198	224	16	13	13	NUM
fuelectenerg-198	224	17	-	-	SYM
fuelectenerg-198	224	18	3573	3573	NUM
fuelectenerg-198	224	19	.	.	PUNCT
fuelectenerg-198	225	1	physical	physical	ADJ
fuelectenerg-198	225	2	modeling	modeling	NOUN
fuelectenerg-198	225	3	of	of	ADP
fuelectenerg-198	225	4	ta2o5	ta2o5	PROPN
fuelectenerg-198	225	5	based	base	VERB
fuelectenerg-198	225	6	mos	mos	PROPN
fuelectenerg-198	225	7	capacitors	capacitor	NOUN
fuelectenerg-198	225	8	on	on	ADP
fuelectenerg-198	225	9	si	si	PROPN
fuelectenerg-198	225	10	271	271	NUM
fuelectenerg-198	225	11	references	reference	NOUN
fuelectenerg-198	225	12	[	[	X
fuelectenerg-198	225	13	1	1	NUM
fuelectenerg-198	225	14	]	]	PUNCT
fuelectenerg-198	225	15	j.	j.	PROPN
fuelectenerg-198	225	16	zhang	zhang	PROPN
fuelectenerg-198	225	17	,	,	PUNCT
fuelectenerg-198	225	18	z.	z.	PROPN
fuelectenerg-198	225	19	li	li	PROPN
fuelectenerg-198	225	20	,	,	PUNCT
fuelectenerg-198	225	21	h.	h.	PROPN
fuelectenerg-198	225	22	zhou	zhou	PROPN
fuelectenerg-198	225	23	,	,	PUNCT
fuelectenerg-198	225	24	c.	c.	PROPN
fuelectenerg-198	225	25	ye	ye	PROPN
fuelectenerg-198	225	26	and	and	CCONJ
fuelectenerg-198	225	27	h.	h.	PROPN
fuelectenerg-198	225	28	wang	wang	PROPN
fuelectenerg-198	225	29	,	,	PUNCT
fuelectenerg-198	225	30	“	"	PUNCT
fuelectenerg-198	225	31	electrical	electrical	ADJ
fuelectenerg-198	225	32	,	,	PUNCT
fuelectenerg-198	225	33	optical	optical	ADJ
fuelectenerg-198	225	34	and	and	CCONJ
fuelectenerg-198	225	35	micro	micro	ADJ
fuelectenerg-198	225	36	-	-	ADJ
fuelectenerg-198	225	37	structural	structural	ADJ
fuelectenerg-198	225	38	properties	property	NOUN
fuelectenerg-198	225	39	of	of	ADP
fuelectenerg-198	225	40	ultrathin	ultrathin	ADJ
fuelectenerg-198	225	41	hftion	hftion	NOUN
fuelectenerg-198	225	42	films	film	NOUN
fuelectenerg-198	225	43	”	"	PUNCT
fuelectenerg-198	225	44	,	,	PUNCT
fuelectenerg-198	225	45	applied	apply	VERB
fuelectenerg-198	225	46	surface	surface	NOUN
fuelectenerg-198	225	47	science	science	NOUN
fuelectenerg-198	225	48	,	,	PUNCT
fuelectenerg-198	225	49	in	in	ADP
fuelectenerg-198	225	50	press	press	NOUN
fuelectenerg-198	225	51	,	,	PUNCT
fuelectenerg-198	225	52	http://dx.doi.org/10.1016/j.apsusc.2013.12.064	http://dx.doi.org/10.1016/j.apsusc.2013.12.064	NOUN
fuelectenerg-198	225	53	.	.	PUNCT
fuelectenerg-198	226	1	[	[	X
fuelectenerg-198	226	2	2	2	NUM
fuelectenerg-198	226	3	]	]	X
fuelectenerg-198	226	4	c.ye	c.ye	PROPN
fuelectenerg-198	226	5	,	,	PUNCT
fuelectenerg-198	226	6	c.	c.	PROPN
fuelectenerg-198	226	7	zhan	zhan	PROPN
fuelectenerg-198	226	8	,	,	PUNCT
fuelectenerg-198	226	9	j.	j.	PROPN
fuelectenerg-198	226	10	zhang	zhang	PROPN
fuelectenerg-198	226	11	,	,	PUNCT
fuelectenerg-198	226	12	h.	h.	PROPN
fuelectenerg-198	226	13	wang	wang	PROPN
fuelectenerg-198	226	14	,	,	PUNCT
fuelectenerg-198	226	15	t.	t.	PROPN
fuelectenerg-198	226	16	deng	deng	PROPN
fuelectenerg-198	226	17	and	and	CCONJ
fuelectenerg-198	226	18	s.	s.	PROPN
fuelectenerg-198	226	19	tang	tang	PROPN
fuelectenerg-198	226	20	,	,	PUNCT
fuelectenerg-198	226	21	“	"	PUNCT
fuelectenerg-198	226	22	influence	influence	NOUN
fuelectenerg-198	226	23	of	of	ADP
fuelectenerg-198	226	24	rapid	rapid	ADJ
fuelectenerg-198	226	25	thermal	thermal	ADJ
fuelectenerg-198	226	26	annealing	anneal	VERB
fuelectenerg-198	226	27	temperature	temperature	NOUN
fuelectenerg-198	226	28	on	on	ADP
fuelectenerg-198	226	29	structure	structure	NOUN
fuelectenerg-198	226	30	and	and	CCONJ
fuelectenerg-198	226	31	electrical	electrical	ADJ
fuelectenerg-198	226	32	properties	property	NOUN
fuelectenerg-198	226	33	of	of	ADP
fuelectenerg-198	226	34	high	high	ADJ
fuelectenerg-198	226	35	permittivity	permittivity	NOUN
fuelectenerg-198	226	36	hftio	hftio	NOUN
fuelectenerg-198	226	37	thin	thin	ADJ
fuelectenerg-198	226	38	film	film	NOUN
fuelectenerg-198	226	39	used	use	VERB
fuelectenerg-198	226	40	in	in	ADP
fuelectenerg-198	226	41	mosfet	mosfet	NOUN
fuelectenerg-198	226	42	”	"	PUNCT
fuelectenerg-198	226	43	,	,	PUNCT
fuelectenerg-198	226	44	microelectronics	microelectronic	NOUN
fuelectenerg-198	226	45	reliability	reliability	NOUN
fuelectenerg-198	226	46	54	54	NUM
fuelectenerg-198	226	47	,	,	PUNCT
fuelectenerg-198	226	48	2014	2014	NUM
fuelectenerg-198	226	49	,	,	PUNCT
fuelectenerg-198	226	50	pp	pp	ADJ
fuelectenerg-198	226	51	.	.	PUNCT
fuelectenerg-198	227	1	388–392	388–392	NUM
fuelectenerg-198	227	2	.	.	PROPN
fuelectenerg-198	227	3	(	(	PUNCT
fuelectenerg-198	227	4	anneling	annele	VERB
fuelectenerg-198	227	5	)	)	PUNCT
fuelectenerg-198	228	1	[	[	X
fuelectenerg-198	228	2	3	3	X
fuelectenerg-198	228	3	]	]	PUNCT
fuelectenerg-198	228	4	s.	s.	PROPN
fuelectenerg-198	228	5	chen	chen	PROPN
fuelectenerg-198	228	6	,	,	PUNCT
fuelectenerg-198	228	7	zh	zh	PROPN
fuelectenerg-198	228	8	.	.	PUNCT
fuelectenerg-198	228	9	liu	liu	PROPN
fuelectenerg-198	228	10	,	,	PUNCT
fuelectenerg-198	228	11	l.	l.	PROPN
fuelectenerg-198	228	12	feng	feng	PROPN
fuelectenerg-198	228	13	,	,	PUNCT
fuelectenerg-198	228	14	x.	x.	PROPN
fuelectenerg-198	228	15	che	che	PROPN
fuelectenerg-198	228	16	and	and	CCONJ
fuelectenerg-198	228	17	x.	x.	PROPN
fuelectenerg-198	228	18	zhao	zhao	PROPN
fuelectenerg-198	228	19	,	,	PUNCT
fuelectenerg-198	228	20	“	"	PUNCT
fuelectenerg-198	228	21	the	the	DET
fuelectenerg-198	228	22	dielectric	dielectric	ADJ
fuelectenerg-198	228	23	properties	property	NOUN
fuelectenerg-198	228	24	enhancement	enhancement	NOUN
fuelectenerg-198	228	25	due	due	ADP
fuelectenerg-198	228	26	to	to	ADP
fuelectenerg-198	228	27	yb	yb	PROPN
fuelectenerg-198	228	28	incorporation	incorporation	NOUN
fuelectenerg-198	228	29	into	into	ADP
fuelectenerg-198	228	30	hfo2	hfo2	NOUN
fuelectenerg-198	228	31	”	"	PUNCT
fuelectenerg-198	228	32	,	,	PUNCT
fuelectenerg-198	228	33	appl	appl	PROPN
fuelectenerg-198	228	34	.	.	PUNCT
fuelectenerg-198	229	1	phys	phy	NOUN
fuelectenerg-198	229	2	.	.	PUNCT
fuelectenerg-198	230	1	lett	lett	PROPN
fuelectenerg-198	230	2	.	.	PROPN
fuelectenerg-198	231	1	103	103	NUM
fuelectenerg-198	231	2	2013	2013	NUM
fuelectenerg-198	231	3	,	,	PUNCT
fuelectenerg-198	231	4	pp	pp	ADP
fuelectenerg-198	231	5	.	.	PUNCT
fuelectenerg-198	232	1	132902	132902	NUM
fuelectenerg-198	232	2	(	(	PUNCT
fuelectenerg-198	232	3	4	4	NUM
fuelectenerg-198	232	4	pages	page	NOUN
fuelectenerg-198	232	5	)	)	PUNCT
fuelectenerg-198	232	6	.	.	PUNCT
fuelectenerg-198	233	1	[	[	X
fuelectenerg-198	233	2	4	4	NUM
fuelectenerg-198	233	3	]	]	X
fuelectenerg-198	233	4	g.lee	g.lee	PROPN
fuelectenerg-198	233	5	,	,	PUNCT
fuelectenerg-198	233	6	b.-k	b.-k	PROPN
fuelectenerg-198	233	7	.	.	PUNCT
fuelectenerg-198	234	1	lai	lai	PROPN
fuelectenerg-198	234	2	,	,	PUNCT
fuelectenerg-198	234	3	c.	c.	PROPN
fuelectenerg-198	234	4	phatak	phatak	PROPN
fuelectenerg-198	234	5	,	,	PUNCT
fuelectenerg-198	234	6	r.	r.	PROPN
fuelectenerg-198	234	7	s.	s.	PROPN
fuelectenerg-198	234	8	katiyar	katiyar	PROPN
fuelectenerg-198	234	9	and	and	CCONJ
fuelectenerg-198	234	10	o.	o.	PROPN
fuelectenerg-198	234	11	auciello	auciello	PROPN
fuelectenerg-198	234	12	,	,	PUNCT
fuelectenerg-198	234	13	“	"	PUNCT
fuelectenerg-198	234	14	interface	interface	NOUN
fuelectenerg-198	234	15	-	-	PUNCT
fuelectenerg-198	234	16	controlled	control	VERB
fuelectenerg-198	234	17	high	high	ADJ
fuelectenerg-198	234	18	dielectric	dielectric	ADJ
fuelectenerg-198	234	19	constant	constant	ADJ
fuelectenerg-198	234	20	al2o3	al2o3	NOUN
fuelectenerg-198	234	21	/	/	SYM
fuelectenerg-198	234	22	tiox	tiox	NOUN
fuelectenerg-198	234	23	nanolaminates	nanolaminate	NOUN
fuelectenerg-198	234	24	with	with	ADP
fuelectenerg-198	234	25	low	low	ADJ
fuelectenerg-198	234	26	loss	loss	NOUN
fuelectenerg-198	234	27	and	and	CCONJ
fuelectenerg-198	234	28	low	low	ADJ
fuelectenerg-198	234	29	leakage	leakage	NOUN
fuelectenerg-198	234	30	current	current	ADJ
fuelectenerg-198	234	31	density	density	NOUN
fuelectenerg-198	234	32	for	for	ADP
fuelectenerg-198	234	33	new	new	ADJ
fuelectenerg-198	234	34	generation	generation	NOUN
fuelectenerg-198	234	35	nanodevices	nanodevice	NOUN
fuelectenerg-198	234	36	”	"	PUNCT
fuelectenerg-198	234	37	,	,	PUNCT
fuelectenerg-198	234	38	j.	j.	PROPN
fuelectenerg-198	234	39	appl	appl	PROPN
fuelectenerg-198	234	40	.	.	PUNCT
fuelectenerg-198	235	1	phys	phy	NOUN
fuelectenerg-198	235	2	.	.	PUNCT
fuelectenerg-198	236	1	114	114	NUM
fuelectenerg-198	236	2	,	,	PUNCT
fuelectenerg-198	236	3	2013	2013	NUM
fuelectenerg-198	236	4	,	,	PUNCT
fuelectenerg-198	236	5	pp	pp	ADP
fuelectenerg-198	236	6	.	.	PUNCT
fuelectenerg-198	237	1	027001	027001	NUM
fuelectenerg-198	237	2	(	(	PUNCT
fuelectenerg-198	237	3	5	5	NUM
fuelectenerg-198	237	4	pages	page	NOUN
fuelectenerg-198	237	5	)	)	PUNCT
fuelectenerg-198	237	6	.	.	PUNCT
fuelectenerg-198	238	1	[	[	X
fuelectenerg-198	238	2	5	5	NUM
fuelectenerg-198	238	3	]	]	PUNCT
fuelectenerg-198	238	4	m.	m.	PROPN
fuelectenerg-198	238	5	ali	ali	PROPN
fuelectenerg-198	238	6	khaskheli	khaskheli	PROPN
fuelectenerg-198	238	7	,	,	PUNCT
fuelectenerg-198	238	8	p.	p.	PROPN
fuelectenerg-198	238	9	wu	wu	PROPN
fuelectenerg-198	238	10	,	,	PUNCT
fuelectenerg-198	238	11	r.	r.	PROPN
fuelectenerg-198	238	12	chand	chand	PROPN
fuelectenerg-198	238	13	,	,	PUNCT
fuelectenerg-198	238	14	x.	x.	PROPN
fuelectenerg-198	238	15	li	li	PROPN
fuelectenerg-198	238	16	,	,	PUNCT
fuelectenerg-198	238	17	h.	h.	PROPN
fuelectenerg-198	238	18	wang	wang	PROPN
fuelectenerg-198	238	19	,	,	PUNCT
fuelectenerg-198	238	20	sh	sh	PROPN
fuelectenerg-198	238	21	.	.	PROPN
fuelectenerg-198	238	22	zhang	zhang	PROPN
fuelectenerg-198	238	23	,	,	PUNCT
fuelectenerg-198	238	24	s.	s.	PROPN
fuelectenerg-198	238	25	chen	chen	PROPN
fuelectenerg-198	238	26	and	and	CCONJ
fuelectenerg-198	238	27	yili	yili	PROPN
fuelectenerg-198	238	28	pei	pei	PROPN
fuelectenerg-198	238	29	,	,	PUNCT
fuelectenerg-198	238	30	“	"	PUNCT
fuelectenerg-198	238	31	structural	structural	ADJ
fuelectenerg-198	238	32	and	and	CCONJ
fuelectenerg-198	238	33	dielectric	dielectric	ADJ
fuelectenerg-198	238	34	properties	property	NOUN
fuelectenerg-198	238	35	of	of	ADP
fuelectenerg-198	238	36	ti	ti	NOUN
fuelectenerg-198	238	37	and	and	CCONJ
fuelectenerg-198	238	38	er	er	INTJ
fuelectenerg-198	238	39	co	co	ADJ
fuelectenerg-198	238	40	-	-	ADJ
fuelectenerg-198	238	41	doped	doped	ADJ
fuelectenerg-198	238	42	hfo2	hfo2	NOUN
fuelectenerg-198	238	43	gate	gate	NOUN
fuelectenerg-198	238	44	dielectrics	dielectric	NOUN
fuelectenerg-198	238	45	grown	grow	VERB
fuelectenerg-198	238	46	by	by	ADP
fuelectenerg-198	238	47	rf	rf	NOUN
fuelectenerg-198	238	48	sputtering	sputtering	NOUN
fuelectenerg-198	238	49	”	"	PUNCT
fuelectenerg-198	238	50	,	,	PUNCT
fuelectenerg-198	238	51	applied	apply	VERB
fuelectenerg-198	238	52	surface	surface	NOUN
fuelectenerg-198	238	53	science	science	NOUN
fuelectenerg-198	238	54	266	266	NUM
fuelectenerg-198	238	55	,	,	PUNCT
fuelectenerg-198	238	56	2013	2013	NUM
fuelectenerg-198	238	57	,	,	PUNCT
fuelectenerg-198	238	58	pp	pp	ADJ
fuelectenerg-198	238	59	.	.	PUNCT
fuelectenerg-198	239	1	355–359	355–359	NUM
fuelectenerg-198	239	2	[	[	X
fuelectenerg-198	239	3	6	6	NUM
fuelectenerg-198	239	4	]	]	PUNCT
fuelectenerg-198	239	5	b.	b.	PROPN
fuelectenerg-198	239	6	toomey	toomey	PROPN
fuelectenerg-198	239	7	,	,	PUNCT
fuelectenerg-198	239	8	k.	k.	PROPN
fuelectenerg-198	239	9	cherkaoui	cherkaoui	PROPN
fuelectenerg-198	239	10	,	,	PUNCT
fuelectenerg-198	239	11	s.	s.	PROPN
fuelectenerg-198	239	12	monaghan	monaghan	PROPN
fuelectenerg-198	239	13	,	,	PUNCT
fuelectenerg-198	239	14	v.	v.	ADP
fuelectenerg-198	239	15	djara	djara	PROPN
fuelectenerg-198	239	16	,	,	PUNCT
fuelectenerg-198	239	17	é	é	PROPN
fuelectenerg-198	239	18	.	.	PROPN
fuelectenerg-198	239	19	o’connor	o’connor	ADV
fuelectenerg-198	239	20	,	,	PUNCT
fuelectenerg-198	239	21	d.	d.	PROPN
fuelectenerg-198	239	22	o’connell	o’connell	PROPN
fuelectenerg-198	239	23	,	,	PUNCT
fuelectenerg-198	239	24	l.	l.	PROPN
fuelectenerg-198	239	25	oberbeck	oberbeck	PROPN
fuelectenerg-198	239	26	,	,	PUNCT
fuelectenerg-198	239	27	e.	e.	PROPN
fuelectenerg-198	239	28	tois	tois	PROPN
fuelectenerg-198	239	29	,	,	PUNCT
fuelectenerg-198	239	30	t.	t.	PROPN
fuelectenerg-198	239	31	blomberg	blomberg	PROPN
fuelectenerg-198	239	32	,	,	PUNCT
fuelectenerg-198	239	33	s.b	s.b	PROPN
fuelectenerg-198	239	34	.	.	PROPN
fuelectenerg-198	239	35	newcomb	newcomb	PROPN
fuelectenerg-198	239	36	and	and	CCONJ
fuelectenerg-198	239	37	p.k	p.k	PROPN
fuelectenerg-198	239	38	.	.	PROPN
fuelectenerg-198	239	39	hurley	hurley	PROPN
fuelectenerg-198	239	40	,	,	PUNCT
fuelectenerg-198	239	41	“	"	PUNCT
fuelectenerg-198	239	42	the	the	DET
fuelectenerg-198	239	43	structural	structural	ADJ
fuelectenerg-198	239	44	andelectrical	andelectrical	ADJ
fuelectenerg-198	239	45	characterization	characterization	NOUN
fuelectenerg-198	239	46	of	of	ADP
fuelectenerg-198	239	47	a	a	DET
fuelectenerg-198	239	48	hferox	hferox	PROPN
fuelectenerg-198	239	49	dielectric	dielectric	NOUN
fuelectenerg-198	239	50	for	for	ADP
fuelectenerg-198	239	51	mim	mim	PROPN
fuelectenerg-198	239	52	capacitor	capacitor	NOUN
fuelectenerg-198	239	53	dram	dram	PROPN
fuelectenerg-198	239	54	applications	application	NOUN
fuelectenerg-198	239	55	”	"	PUNCT
fuelectenerg-198	239	56	,	,	PUNCT
fuelectenerg-198	239	57	microelectronic	microelectronic	ADJ
fuelectenerg-198	239	58	engineering	engineering	NOUN
fuelectenerg-198	239	59	94	94	NUM
fuelectenerg-198	239	60	,	,	PUNCT
fuelectenerg-198	239	61	2012	2012	NUM
fuelectenerg-198	239	62	,	,	PUNCT
fuelectenerg-198	239	63	pp	pp	ADP
fuelectenerg-198	239	64	.	.	PUNCT
fuelectenerg-198	240	1	7–10	7–10	NOUN
fuelectenerg-198	241	1	[	[	X
fuelectenerg-198	241	2	7	7	NUM
fuelectenerg-198	241	3	]	]	PUNCT
fuelectenerg-198	241	4	z.	z.	PROPN
fuelectenerg-198	241	5	essa	essa	PROPN
fuelectenerg-198	241	6	,	,	PUNCT
fuelectenerg-198	241	7	c.	c.	PROPN
fuelectenerg-198	241	8	gaumer	gaumer	PROPN
fuelectenerg-198	241	9	,	,	PUNCT
fuelectenerg-198	241	10	a.	a.	NOUN
fuelectenerg-198	241	11	pakfar	pakfar	PROPN
fuelectenerg-198	241	12	,	,	PUNCT
fuelectenerg-198	241	13	m.	m.	NOUN
fuelectenerg-198	241	14	gros	gros	X
fuelectenerg-198	241	15	-	-	PUNCT
fuelectenerg-198	241	16	jean	jean	PROPN
fuelectenerg-198	241	17	,	,	PUNCT
fuelectenerg-198	241	18	m.	m.	PROPN
fuelectenerg-198	241	19	juhel	juhel	PROPN
fuelectenerg-198	241	20	,	,	PUNCT
fuelectenerg-198	241	21	f.	f.	PROPN
fuelectenerg-198	241	22	panciera	panciera	PROPN
fuelectenerg-198	241	23	,	,	PUNCT
fuelectenerg-198	241	24	p.	p.	PROPN
fuelectenerg-198	241	25	boulenc	boulenc	PROPN
fuelectenerg-198	241	26	,	,	PUNCT
fuelectenerg-198	241	27	c.	c.	PROPN
fuelectenerg-198	241	28	tavernier	tavernier	PROPN
fuelectenerg-198	241	29	and	and	CCONJ
fuelectenerg-198	241	30	f.	f.	PROPN
fuelectenerg-198	241	31	cristiano	cristiano	PROPN
fuelectenerg-198	241	32	,	,	PUNCT
fuelectenerg-198	241	33	“	"	PUNCT
fuelectenerg-198	241	34	evaluation	evaluation	NOUN
fuelectenerg-198	241	35	and	and	CCONJ
fuelectenerg-198	241	36	modeling	modeling	NOUN
fuelectenerg-198	241	37	of	of	ADP
fuelectenerg-198	241	38	lanthanum	lanthanum	ADJ
fuelectenerg-198	241	39	diffusion	diffusion	NOUN
fuelectenerg-198	241	40	in	in	ADP
fuelectenerg-198	241	41	tin	tin	NOUN
fuelectenerg-198	241	42	/	/	SYM
fuelectenerg-198	241	43	la2o3	la2o3	NOUN
fuelectenerg-198	241	44	/	/	SYM
fuelectenerg-198	241	45	hfsion	hfsion	NOUN
fuelectenerg-198	241	46	/	/	SYM
fuelectenerg-198	241	47	sio2	sio2	PROPN
fuelectenerg-198	241	48	/	/	SYM
fuelectenerg-198	241	49	si	si	X
fuelectenerg-198	241	50	high	high	ADJ
fuelectenerg-198	241	51	-	-	PUNCT
fuelectenerg-198	241	52	k	k	PROPN
fuelectenerg-198	241	53	stacks	stack	NOUN
fuelectenerg-198	241	54	”	"	PUNCT
fuelectenerg-198	241	55	,	,	PUNCT
fuelectenerg-198	241	56	appl	appl	PROPN
fuelectenerg-198	241	57	.	.	PUNCT
fuelectenerg-198	242	1	phys	phy	NOUN
fuelectenerg-198	242	2	.	.	PUNCT
fuelectenerg-198	243	1	lett	lett	PROPN
fuelectenerg-198	243	2	.	.	PUNCT
fuelectenerg-198	244	1	101	101	NUM
fuelectenerg-198	244	2	2012	2012	NUM
fuelectenerg-198	244	3	,	,	PUNCT
fuelectenerg-198	244	4	pp	pp	ADP
fuelectenerg-198	244	5	.	.	PUNCT
fuelectenerg-198	245	1	182901	182901	NUM
fuelectenerg-198	245	2	(	(	PUNCT
fuelectenerg-198	245	3	5	5	NUM
fuelectenerg-198	245	4	pages	page	NOUN
fuelectenerg-198	245	5	)	)	PUNCT
fuelectenerg-198	245	6	.	.	PUNCT
fuelectenerg-198	246	1	[	[	X
fuelectenerg-198	246	2	8	8	X
fuelectenerg-198	246	3	]	]	X
fuelectenerg-198	246	4	t.	t.	NOUN
fuelectenerg-198	246	5	usui	usui	NOUN
fuelectenerg-198	246	6	,	,	PUNCT
fuelectenerg-198	246	7	s.	s.	PROPN
fuelectenerg-198	246	8	a.	a.	PROPN
fuelectenerg-198	246	9	mollinger	mollinger	PROPN
fuelectenerg-198	246	10	,	,	PUNCT
fuelectenerg-198	246	11	a.	a.	PROPN
fuelectenerg-198	246	12	t.	t.	PROPN
fuelectenerg-198	246	13	iancu	iancu	PROPN
fuelectenerg-198	246	14	,	,	PUNCT
fuelectenerg-198	246	15	r.	r.	PROPN
fuelectenerg-198	246	16	m.	m.	PROPN
fuelectenerg-198	246	17	reis	reis	PROPN
fuelectenerg-198	246	18	and	and	CCONJ
fuelectenerg-198	246	19	f.	f.	PROPN
fuelectenerg-198	246	20	b.	b.	PROPN
fuelectenerg-198	246	21	prinz	prinz	PROPN
fuelectenerg-198	246	22	,	,	PUNCT
fuelectenerg-198	246	23	“	"	PUNCT
fuelectenerg-198	246	24	high	high	ADJ
fuelectenerg-198	246	25	aspect	aspect	NOUN
fuelectenerg-198	246	26	ratio	ratio	NOUN
fuelectenerg-198	246	27	and	and	CCONJ
fuelectenerg-198	246	28	high	high	ADJ
fuelectenerg-198	246	29	breakdown	breakdown	NOUN
fuelectenerg-198	246	30	strength	strength	NOUN
fuelectenerg-198	246	31	metal	metal	NOUN
fuelectenerg-198	246	32	-	-	PUNCT
fuelectenerg-198	246	33	oxide	oxide	NOUN
fuelectenerg-198	246	34	capacitors	capacitor	NOUN
fuelectenerg-198	246	35	”	"	PUNCT
fuelectenerg-198	246	36	,	,	PUNCT
fuelectenerg-198	246	37	appl	appl	NOUN
fuelectenerg-198	246	38	.	.	PUNCT
fuelectenerg-198	247	1	phys	phy	NOUN
fuelectenerg-198	247	2	.	.	PUNCT
fuelectenerg-198	248	1	lett	lett	PROPN
fuelectenerg-198	248	2	.	.	PUNCT
fuelectenerg-198	249	1	101	101	NUM
fuelectenerg-198	249	2	2012	2012	NUM
fuelectenerg-198	249	3	,	,	PUNCT
fuelectenerg-198	249	4	pp	pp	ADV
fuelectenerg-198	249	5	.	.	PUNCT
fuelectenerg-198	250	1	033905	033905	NUM
fuelectenerg-198	250	2	(	(	PUNCT
fuelectenerg-198	250	3	4	4	NUM
fuelectenerg-198	250	4	pages	page	NOUN
fuelectenerg-198	250	5	)	)	PUNCT
fuelectenerg-198	250	6	.	.	PUNCT
fuelectenerg-198	251	1	[	[	X
fuelectenerg-198	251	2	9	9	NUM
fuelectenerg-198	251	3	]	]	PUNCT
fuelectenerg-198	251	4	w.yang	w.yang	X
fuelectenerg-198	251	5	,	,	PUNCT
fuelectenerg-198	251	6	q.-q	q.-q	PROPN
fuelectenerg-198	251	7	.	.	PUNCT
fuelectenerg-198	251	8	sun	sun	PROPN
fuelectenerg-198	251	9	,	,	PUNCT
fuelectenerg-198	251	10	r.-c	r.-c	PROPN
fuelectenerg-198	251	11	.	.	PUNCT
fuelectenerg-198	252	1	fang	fang	PROPN
fuelectenerg-198	252	2	,	,	PUNCT
fuelectenerg-198	252	3	l.	l.	PROPN
fuelectenerg-198	252	4	chen	chen	PROPN
fuelectenerg-198	252	5	,	,	PUNCT
fuelectenerg-198	252	6	p.	p.	PROPN
fuelectenerg-198	252	7	zhou	zhou	PROPN
fuelectenerg-198	252	8	,	,	PUNCT
fuelectenerg-198	252	9	s.-j	s.-j	PROPN
fuelectenerg-198	252	10	.	.	PUNCT
fuelectenerg-198	253	1	ding	ding	NOUN
fuelectenerg-198	253	2	and	and	CCONJ
fuelectenerg-198	253	3	d.w	d.w	PROPN
fuelectenerg-198	253	4	.	.	PROPN
fuelectenerg-198	253	5	zhang	zhang	PROPN
fuelectenerg-198	253	6	,	,	PUNCT
fuelectenerg-198	253	7	“	"	PUNCT
fuelectenerg-198	253	8	the	the	DET
fuelectenerg-198	253	9	thermal	thermal	ADJ
fuelectenerg-198	253	10	stability	stability	NOUN
fuelectenerg-198	253	11	of	of	ADP
fuelectenerg-198	253	12	atomic	atomic	ADJ
fuelectenerg-198	253	13	layer	layer	NOUN
fuelectenerg-198	253	14	deposited	deposit	VERB
fuelectenerg-198	253	15	hflaox	hflaox	ADJ
fuelectenerg-198	253	16	:	:	PUNCT
fuelectenerg-198	253	17	material	material	NOUN
fuelectenerg-198	253	18	and	and	CCONJ
fuelectenerg-198	253	19	electrical	electrical	ADJ
fuelectenerg-198	253	20	characterization	characterization	NOUN
fuelectenerg-198	253	21	”	"	PUNCT
fuelectenerg-198	253	22	,	,	PUNCT
fuelectenerg-198	253	23	current	current	ADJ
fuelectenerg-198	253	24	applied	apply	VERB
fuelectenerg-198	253	25	physics	physics	NOUN
fuelectenerg-198	253	26	12	12	NUM
fuelectenerg-198	253	27	,	,	PUNCT
fuelectenerg-198	253	28	2012	2012	NUM
fuelectenerg-198	253	29	,	,	PUNCT
fuelectenerg-198	253	30	pp	pp	ADV
fuelectenerg-198	253	31	.	.	PUNCT
fuelectenerg-198	254	1	1445–1447	1445–1447	NUM
fuelectenerg-198	255	1	[	[	SYM
fuelectenerg-198	255	2	10	10	NUM
fuelectenerg-198	255	3	]	]	PUNCT
fuelectenerg-198	255	4	t.	t.	PROPN
fuelectenerg-198	255	5	yu	yu	PROPN
fuelectenerg-198	255	6	,	,	PUNCT
fuelectenerg-198	255	7	c.	c.	PROPN
fuelectenerg-198	255	8	jin	jin	PROPN
fuelectenerg-198	255	9	,	,	PUNCT
fuelectenerg-198	255	10	x.	x.	PROPN
fuelectenerg-198	255	11	yang	yang	PROPN
fuelectenerg-198	255	12	,	,	PUNCT
fuelectenerg-198	255	13	y.	y.	PROPN
fuelectenerg-198	255	14	dong	dong	PROPN
fuelectenerg-198	255	15	,	,	PUNCT
fuelectenerg-198	255	16	h.	h.	PROPN
fuelectenerg-198	255	17	zhang	zhang	PROPN
fuelectenerg-198	255	18	,	,	PUNCT
fuelectenerg-198	255	19	l.	l.	PROPN
fuelectenerg-198	255	20	zhuge	zhuge	PROPN
fuelectenerg-198	255	21	,	,	PUNCT
fuelectenerg-198	255	22	x.	x.	PROPN
fuelectenerg-198	255	23	wu	wu	PROPN
fuelectenerg-198	255	24	and	and	CCONJ
fuelectenerg-198	255	25	z.	z.	PROPN
fuelectenerg-198	255	26	wu	wu	PROPN
fuelectenerg-198	255	27	,	,	PUNCT
fuelectenerg-198	255	28	“	"	PUNCT
fuelectenerg-198	255	29	the	the	DET
fuelectenerg-198	255	30	structure	structure	NOUN
fuelectenerg-198	255	31	and	and	CCONJ
fuelectenerg-198	255	32	electrical	electrical	ADJ
fuelectenerg-198	255	33	properties	property	NOUN
fuelectenerg-198	255	34	of	of	ADP
fuelectenerg-198	255	35	hftaon	hftaon	ADJ
fuelectenerg-198	255	36	high	high	ADJ
fuelectenerg-198	255	37	-	-	PUNCT
fuelectenerg-198	255	38	k	k	PROPN
fuelectenerg-198	255	39	films	film	NOUN
fuelectenerg-198	255	40	prepared	prepare	VERB
fuelectenerg-198	255	41	by	by	ADP
fuelectenerg-198	255	42	dibsd	dibsd	PROPN
fuelectenerg-198	255	43	”	"	PUNCT
fuelectenerg-198	255	44	,	,	PUNCT
fuelectenerg-198	255	45	applied	apply	VERB
fuelectenerg-198	255	46	surface	surface	NOUN
fuelectenerg-198	255	47	science	science	NOUN
fuelectenerg-198	255	48	258	258	NUM
fuelectenerg-198	255	49	,	,	PUNCT
fuelectenerg-198	255	50	2012	2012	NUM
fuelectenerg-198	255	51	,	,	PUNCT
fuelectenerg-198	255	52	pp	pp	ADJ
fuelectenerg-198	255	53	.	.	PUNCT
fuelectenerg-198	256	1	2953	2953	NUM
fuelectenerg-198	256	2	–	–	PUNCT
fuelectenerg-198	256	3	2958	2958	NUM
fuelectenerg-198	257	1	[	[	X
fuelectenerg-198	257	2	11	11	NUM
fuelectenerg-198	257	3	]	]	PUNCT
fuelectenerg-198	257	4	x.	x.	PROPN
fuelectenerg-198	257	5	zhang	zhang	PROPN
fuelectenerg-198	257	6	,	,	PUNCT
fuelectenerg-198	257	7	h.	h.	PROPN
fuelectenerg-198	257	8	tu	tu	PROPN
fuelectenerg-198	257	9	,	,	PUNCT
fuelectenerg-198	257	10	y.	y.	PROPN
fuelectenerg-198	257	11	guo	guo	PROPN
fuelectenerg-198	257	12	,	,	PUNCT
fuelectenerg-198	257	13	h.	h.	PROPN
fuelectenerg-198	257	14	zhao	zhao	PROPN
fuelectenerg-198	257	15	,	,	PUNCT
fuelectenerg-198	257	16	m.	m.	PROPN
fuelectenerg-198	257	17	yang	yang	PROPN
fuelectenerg-198	257	18	,	,	PUNCT
fuelectenerg-198	257	19	f.	f.	PROPN
fuelectenerg-198	257	20	wei	wei	PROPN
fuelectenerg-198	257	21	,	,	PUNCT
fuelectenerg-198	257	22	y.	y.	PROPN
fuelectenerg-198	257	23	xiong	xiong	PROPN
fuelectenerg-198	257	24	,	,	PUNCT
fuelectenerg-198	257	25	z.	z.	PROPN
fuelectenerg-198	257	26	yang	yang	PROPN
fuelectenerg-198	257	27	,	,	PUNCT
fuelectenerg-198	257	28	j.	j.	PROPN
fuelectenerg-198	257	29	du	du	PROPN
fuelectenerg-198	257	30	and	and	CCONJ
fuelectenerg-198	257	31	w.	w.	PROPN
fuelectenerg-198	257	32	wang	wang	PROPN
fuelectenerg-198	257	33	,	,	PUNCT
fuelectenerg-198	257	34	“	"	PUNCT
fuelectenerg-198	257	35	atomic	atomic	ADJ
fuelectenerg-198	257	36	configuration	configuration	NOUN
fuelectenerg-198	257	37	of	of	ADP
fuelectenerg-198	257	38	the	the	DET
fuelectenerg-198	257	39	interface	interface	NOUN
fuelectenerg-198	257	40	between	between	ADP
fuelectenerg-198	257	41	epitaxial	epitaxial	ADJ
fuelectenerg-198	257	42	gd	gd	NOUN
fuelectenerg-198	257	43	doped	dope	VERB
fuelectenerg-198	257	44	hfo2	hfo2	NOUN
fuelectenerg-198	257	45	high	high	ADJ
fuelectenerg-198	257	46	-	-	PUNCT
fuelectenerg-198	257	47	k	k	NOUN
fuelectenerg-198	257	48	thin	thin	ADJ
fuelectenerg-198	257	49	films	film	NOUN
fuelectenerg-198	257	50	and	and	CCONJ
fuelectenerg-198	257	51	ge	ge	PROPN
fuelectenerg-198	257	52	(	(	PUNCT
fuelectenerg-198	257	53	001	001	NUM
fuelectenerg-198	257	54	)	)	PUNCT
fuelectenerg-198	257	55	substrates	substrate	NOUN
fuelectenerg-198	257	56	”	"	PUNCT
fuelectenerg-198	257	57	,	,	PUNCT
fuelectenerg-198	257	58	j.	j.	PROPN
fuelectenerg-198	257	59	appl	appl	PROPN
fuelectenerg-198	257	60	.	.	PUNCT
fuelectenerg-198	258	1	phys	phy	NOUN
fuelectenerg-198	258	2	.	.	PUNCT
fuelectenerg-198	259	1	111	111	NUM
fuelectenerg-198	259	2	,	,	PUNCT
fuelectenerg-198	259	3	2012	2012	NUM
fuelectenerg-198	259	4	,	,	PUNCT
fuelectenerg-198	259	5	pp	pp	ADV
fuelectenerg-198	259	6	.	.	PUNCT
fuelectenerg-198	259	7	014102	014102	NUM
fuelectenerg-198	260	1	(	(	PUNCT
fuelectenerg-198	260	2	4	4	NUM
fuelectenerg-198	260	3	pages	page	NOUN
fuelectenerg-198	260	4	)	)	PUNCT
fuelectenerg-198	261	1	[	[	X
fuelectenerg-198	261	2	12	12	NUM
fuelectenerg-198	261	3	]	]	X
fuelectenerg-198	261	4	l.	l.	PROPN
fuelectenerg-198	261	5	ning	ning	PROPN
fuelectenerg-198	261	6	,	,	PUNCT
fuelectenerg-198	261	7	f.	f.	PROPN
fuelectenerg-198	261	8	yang	yang	PROPN
fuelectenerg-198	261	9	,	,	PUNCT
fuelectenerg-198	261	10	c.	c.	PROPN
fuelectenerg-198	261	11	duan	duan	PROPN
fuelectenerg-198	261	12	,	,	PUNCT
fuelectenerg-198	261	13	y.	y.	PROPN
fuelectenerg-198	261	14	zhang	zhang	PROPN
fuelectenerg-198	261	15	,	,	PUNCT
fuelectenerg-198	261	16	jun	jun	PROPN
fuelectenerg-198	261	17	liang	liang	PROPN
fuelectenerg-198	261	18	and	and	CCONJ
fuelectenerg-198	261	19	z.	z.	PROPN
fuelectenerg-198	261	20	cui	cui	PROPN
fuelectenerg-198	261	21	,	,	PUNCT
fuelectenerg-198	261	22	“	"	PUNCT
fuelectenerg-198	261	23	structural	structural	ADJ
fuelectenerg-198	261	24	properties	property	NOUN
fuelectenerg-198	261	25	and	and	CCONJ
fuelectenerg-198	261	26	4f→5d	4f→5d	NUM
fuelectenerg-198	261	27	absorptions	absorption	NOUN
fuelectenerg-198	261	28	in	in	ADP
fuelectenerg-198	261	29	ce	ce	NOUN
fuelectenerg-198	261	30	-	-	ADJ
fuelectenerg-198	261	31	doped	dope	VERB
fuelectenerg-198	261	32	lualo3	lualo3	PROPN
fuelectenerg-198	261	33	:	:	PUNCT
fuelectenerg-198	261	34	a	a	DET
fuelectenerg-198	261	35	first	first	ADJ
fuelectenerg-198	261	36	-	-	PUNCT
fuelectenerg-198	261	37	principles	principle	NOUN
fuelectenerg-198	261	38	study	study	NOUN
fuelectenerg-198	261	39	”	"	PUNCT
fuelectenerg-198	261	40	,	,	PUNCT
fuelectenerg-198	261	41	j.	j.	PROPN
fuelectenerg-198	261	42	phys	phys	PROPN
fuelectenerg-198	261	43	.	.	PUNCT
fuelectenerg-198	261	44	:	:	PUNCT
fuelectenerg-198	262	1	condens	conden	NOUN
fuelectenerg-198	262	2	.	.	PUNCT
fuelectenerg-198	263	1	matter	matter	PROPN
fuelectenerg-198	263	2	24	24	NUM
fuelectenerg-198	263	3	,	,	PUNCT
fuelectenerg-198	263	4	2012	2012	NUM
fuelectenerg-198	263	5	,	,	PUNCT
fuelectenerg-198	263	6	pp	pp	ADV
fuelectenerg-198	263	7	.	.	PUNCT
fuelectenerg-198	264	1	055502	055502	NUM
fuelectenerg-198	264	2	(	(	PUNCT
fuelectenerg-198	264	3	10	10	NUM
fuelectenerg-198	264	4	pages	page	NOUN
fuelectenerg-198	264	5	)	)	PUNCT
fuelectenerg-198	265	1	[	[	X
fuelectenerg-198	265	2	13	13	NUM
fuelectenerg-198	265	3	]	]	PUNCT
fuelectenerg-198	265	4	l.	l.	PROPN
fuelectenerg-198	265	5	kornblum	kornblum	PROPN
fuelectenerg-198	265	6	,	,	PUNCT
fuelectenerg-198	265	7	b.	b.	PROPN
fuelectenerg-198	265	8	meyler	meyler	PROPN
fuelectenerg-198	265	9	,	,	PUNCT
fuelectenerg-198	265	10	c.	c.	PROPN
fuelectenerg-198	265	11	cytermann	cytermann	PROPN
fuelectenerg-198	265	12	,	,	PUNCT
fuelectenerg-198	265	13	s.	s.	PROPN
fuelectenerg-198	265	14	yofis	yofis	PROPN
fuelectenerg-198	265	15	,	,	PUNCT
fuelectenerg-198	265	16	j.	j.	PROPN
fuelectenerg-198	265	17	salzman	salzman	PROPN
fuelectenerg-198	265	18	and	and	CCONJ
fuelectenerg-198	265	19	m.	m.	PROPN
fuelectenerg-198	265	20	eizenberg	eizenberg	PROPN
fuelectenerg-198	265	21	,	,	PUNCT
fuelectenerg-198	265	22	“	"	PUNCT
fuelectenerg-198	265	23	investigation	investigation	NOUN
fuelectenerg-198	265	24	of	of	ADP
fuelectenerg-198	265	25	the	the	DET
fuelectenerg-198	265	26	band	band	NOUN
fuelectenerg-198	265	27	offsets	offset	NOUN
fuelectenerg-198	265	28	caused	cause	VERB
fuelectenerg-198	265	29	by	by	ADP
fuelectenerg-198	265	30	thin	thin	ADJ
fuelectenerg-198	265	31	al2o3	al2o3	PROPN
fuelectenerg-198	265	32	layers	layer	NOUN
fuelectenerg-198	265	33	in	in	ADP
fuelectenerg-198	265	34	hfo2	hfo2	PROPN
fuelectenerg-198	265	35	based	base	VERB
fuelectenerg-198	265	36	si	si	X
fuelectenerg-198	265	37	metal	metal	NOUN
fuelectenerg-198	265	38	oxide	oxide	NOUN
fuelectenerg-198	265	39	semiconductor	semiconductor	NOUN
fuelectenerg-198	265	40	devices	device	NOUN
fuelectenerg-198	265	41	”	"	PUNCT
fuelectenerg-198	265	42	,	,	PUNCT
fuelectenerg-198	265	43	appl	appl	NOUN
fuelectenerg-198	265	44	.	.	PUNCT
fuelectenerg-198	266	1	phys	phy	NOUN
fuelectenerg-198	266	2	.	.	PUNCT
fuelectenerg-198	267	1	lett	lett	PROPN
fuelectenerg-198	267	2	.	.	PROPN
fuelectenerg-198	268	1	100	100	NUM
fuelectenerg-198	268	2	,	,	PUNCT
fuelectenerg-198	268	3	2012	2012	NUM
fuelectenerg-198	268	4	,	,	PUNCT
fuelectenerg-198	268	5	pp	pp	ADV
fuelectenerg-198	268	6	.	.	PUNCT
fuelectenerg-198	268	7	062907	062907	NUM
fuelectenerg-198	269	1	(	(	PUNCT
fuelectenerg-198	269	2	3	3	NUM
fuelectenerg-198	269	3	pages	page	NOUN
fuelectenerg-198	269	4	)	)	PUNCT
fuelectenerg-198	270	1	[	[	X
fuelectenerg-198	270	2	14	14	NUM
fuelectenerg-198	270	3	]	]	X
fuelectenerg-198	270	4	k.m.a	k.m.a	NOUN
fuelectenerg-198	270	5	.	.	PUNCT
fuelectenerg-198	271	1	salam	salam	PROPN
fuelectenerg-198	271	2	,	,	PUNCT
fuelectenerg-198	271	3	h.	h.	PROPN
fuelectenerg-198	271	4	fukuda	fukuda	PROPN
fuelectenerg-198	271	5	and	and	CCONJ
fuelectenerg-198	271	6	s.	s.	PROPN
fuelectenerg-198	271	7	nomera	nomera	PROPN
fuelectenerg-198	271	8	,	,	PUNCT
fuelectenerg-198	271	9	“	"	PUNCT
fuelectenerg-198	271	10	effects	effect	NOUN
fuelectenerg-198	271	11	of	of	ADP
fuelectenerg-198	271	12	additive	additive	ADJ
fuelectenerg-198	271	13	elements	element	NOUN
fuelectenerg-198	271	14	on	on	ADP
fuelectenerg-198	271	15	improvement	improvement	NOUN
fuelectenerg-198	271	16	of	of	ADP
fuelectenerg-198	271	17	the	the	DET
fuelectenerg-198	271	18	dielectric	dielectric	ADJ
fuelectenerg-198	271	19	properties	property	NOUN
fuelectenerg-198	271	20	of	of	ADP
fuelectenerg-198	271	21	ta2o5	ta2o5	PROPN
fuelectenerg-198	271	22	films	film	NOUN
fuelectenerg-198	271	23	formed	form	VERB
fuelectenerg-198	271	24	by	by	ADP
fuelectenerg-198	271	25	metalorganic	metalorganic	ADJ
fuelectenerg-198	271	26	decomposition	decomposition	NOUN
fuelectenerg-198	271	27	”	"	PUNCT
fuelectenerg-198	271	28	,	,	PUNCT
fuelectenerg-198	271	29	j.	j.	PROPN
fuelectenerg-198	271	30	appl	appl	PROPN
fuelectenerg-198	271	31	.	.	PUNCT
fuelectenerg-198	272	1	phys	phy	NOUN
fuelectenerg-198	272	2	.	.	PUNCT
fuelectenerg-198	273	1	93	93	NUM
fuelectenerg-198	273	2	,	,	PUNCT
fuelectenerg-198	273	3	2003	2003	NUM
fuelectenerg-198	273	4	,	,	PUNCT
fuelectenerg-198	273	5	pp	pp	ADJ
fuelectenerg-198	273	6	.	.	PUNCT
fuelectenerg-198	274	1	1169–1175	1169–1175	NUM
fuelectenerg-198	274	2	.	.	PUNCT
fuelectenerg-198	275	1	[	[	X
fuelectenerg-198	275	2	15	15	NUM
fuelectenerg-198	275	3	]	]	X
fuelectenerg-198	275	4	e.	e.	PROPN
fuelectenerg-198	275	5	atanassova	atanassova	PROPN
fuelectenerg-198	275	6	,	,	PUNCT
fuelectenerg-198	275	7	n.	n.	PROPN
fuelectenerg-198	275	8	novkovski	novkovski	PROPN
fuelectenerg-198	275	9	,	,	PUNCT
fuelectenerg-198	275	10	d.	d.	PROPN
fuelectenerg-198	275	11	spassov	spassov	PROPN
fuelectenerg-198	275	12	,	,	PUNCT
fuelectenerg-198	275	13	a.	a.	PROPN
fuelectenerg-198	275	14	paskaleva	paskaleva	PROPN
fuelectenerg-198	275	15	and	and	CCONJ
fuelectenerg-198	275	16	a.	a.	NOUN
fuelectenerg-198	275	17	skeparovski	skeparovski	PROPN
fuelectenerg-198	275	18	,	,	PUNCT
fuelectenerg-198	275	19	“	"	PUNCT
fuelectenerg-198	275	20	time	time	NOUN
fuelectenerg-198	275	21	-	-	PUNCT
fuelectenerg-198	275	22	dependent	dependent	ADJ
fuelectenerg-198	275	23	-	-	PUNCT
fuelectenerg-198	275	24	dielectricbreakdown	dielectricbreakdown	ADJ
fuelectenerg-198	275	25	characteristics	characteristic	NOUN
fuelectenerg-198	275	26	of	of	ADP
fuelectenerg-198	275	27	hf	hf	ADV
fuelectenerg-198	275	28	-	-	PUNCT
fuelectenerg-198	275	29	doped	dope	VERB
fuelectenerg-198	275	30	ta2o5	ta2o5	PROPN
fuelectenerg-198	275	31	/	/	SYM
fuelectenerg-198	275	32	sio2	sio2	NOUN
fuelectenerg-198	275	33	stack	stack	NOUN
fuelectenerg-198	275	34	”	"	PUNCT
fuelectenerg-198	275	35	,	,	PUNCT
fuelectenerg-198	275	36	microelectron	microelectron	PROPN
fuelectenerg-198	275	37	.	.	PUNCT
fuelectenerg-198	275	38	reliab	reliab	PROPN
fuelectenerg-198	275	39	.	.	PUNCT
fuelectenerg-198	276	1	54	54	NUM
fuelectenerg-198	276	2	,	,	PUNCT
fuelectenerg-198	276	3	2014	2014	NUM
fuelectenerg-198	276	4	,	,	PUNCT
fuelectenerg-198	276	5	pp	pp	ADJ
fuelectenerg-198	276	6	.	.	PUNCT
fuelectenerg-198	277	1	381–387	381–387	NUM
fuelectenerg-198	277	2	.	.	PUNCT
fuelectenerg-198	278	1	[	[	X
fuelectenerg-198	278	2	16	16	NUM
fuelectenerg-198	278	3	]	]	X
fuelectenerg-198	278	4	e.	e.	PROPN
fuelectenerg-198	278	5	atanassova	atanassova	PROPN
fuelectenerg-198	278	6	,	,	PUNCT
fuelectenerg-198	278	7	n.	n.	PROPN
fuelectenerg-198	278	8	stojadinovic	stojadinovic	PROPN
fuelectenerg-198	278	9	,	,	PUNCT
fuelectenerg-198	278	10	d.	d.	PROPN
fuelectenerg-198	278	11	spassov	spassov	PROPN
fuelectenerg-198	278	12	,	,	PUNCT
fuelectenerg-198	278	13	i.	i.	NOUN
fuelectenerg-198	278	14	manic	manic	ADJ
fuelectenerg-198	278	15	and	and	CCONJ
fuelectenerg-198	278	16	a.	a.	NOUN
fuelectenerg-198	278	17	paskaleva	paskaleva	PROPN
fuelectenerg-198	278	18	,	,	PUNCT
fuelectenerg-198	278	19	“	"	PUNCT
fuelectenerg-198	278	20	time	time	NOUN
fuelectenerg-198	278	21	-	-	PUNCT
fuelectenerg-198	278	22	dependent	dependent	ADJ
fuelectenerg-198	278	23	dielectric	dielectric	ADJ
fuelectenerg-198	278	24	breakdown	breakdown	NOUN
fuelectenerg-198	278	25	in	in	ADP
fuelectenerg-198	278	26	pure	pure	ADJ
fuelectenerg-198	278	27	and	and	CCONJ
fuelectenerg-198	278	28	lightly	lightly	ADV
fuelectenerg-198	278	29	al	al	PROPN
fuelectenerg-198	278	30	-	-	PUNCT
fuelectenerg-198	278	31	doped	dope	VERB
fuelectenerg-198	278	32	ta2o5	ta2o5	PROPN
fuelectenerg-198	278	33	stacks	stack	NOUN
fuelectenerg-198	278	34	”	"	PUNCT
fuelectenerg-198	278	35	,	,	PUNCT
fuelectenerg-198	278	36	semicond	semicond	PROPN
fuelectenerg-198	278	37	.	.	PUNCT
fuelectenerg-198	279	1	sci	sci	PROPN
fuelectenerg-198	279	2	.	.	PROPN
fuelectenerg-198	279	3	technol	technol	PROPN
fuelectenerg-198	279	4	.	.	PROPN
fuelectenerg-198	279	5	28	28	NUM
fuelectenerg-198	279	6	,	,	PUNCT
fuelectenerg-198	279	7	2013	2013	NUM
fuelectenerg-198	279	8	,	,	PUNCT
fuelectenerg-198	279	9	pp	pp	ADJ
fuelectenerg-198	279	10	.	.	PUNCT
fuelectenerg-198	279	11	055006	055006	NUM
fuelectenerg-198	279	12	–	–	PUNCT
fuelectenerg-198	279	13	055006	055006	NUM
fuelectenerg-198	279	14	-	-	SYM
fuelectenerg-198	279	15	9	9	NUM
fuelectenerg-198	279	16	[	[	SYM
fuelectenerg-198	279	17	17	17	NUM
fuelectenerg-198	279	18	]	]	X
fuelectenerg-198	279	19	e.	e.	PROPN
fuelectenerg-198	279	20	atanassova	atanassova	PROPN
fuelectenerg-198	279	21	,	,	PUNCT
fuelectenerg-198	279	22	d.	d.	PROPN
fuelectenerg-198	279	23	spassov	spassov	PROPN
fuelectenerg-198	279	24	,	,	PUNCT
fuelectenerg-198	279	25	n.	n.	PROPN
fuelectenerg-198	279	26	novkovski	novkovski	NOUN
fuelectenerg-198	279	27	,	,	PUNCT
fuelectenerg-198	279	28	and	and	CCONJ
fuelectenerg-198	279	29	a.	a.	NOUN
fuelectenerg-198	279	30	paskaleva	paskaleva	PROPN
fuelectenerg-198	279	31	,	,	PUNCT
fuelectenerg-198	279	32	“	"	PUNCT
fuelectenerg-198	279	33	constant	constant	ADJ
fuelectenerg-198	279	34	current	current	ADJ
fuelectenerg-198	279	35	stress	stress	NOUN
fuelectenerg-198	279	36	of	of	ADP
fuelectenerg-198	279	37	lightly	lightly	ADV
fuelectenerg-198	279	38	al	al	PROPN
fuelectenerg-198	279	39	-	-	PUNCT
fuelectenerg-198	279	40	doped	dope	VERB
fuelectenerg-198	279	41	ta2o5	ta2o5	PROPN
fuelectenerg-198	279	42	”	"	PUNCT
fuelectenerg-198	279	43	,	,	PUNCT
fuelectenerg-198	279	44	materials	material	NOUN
fuelectenerg-198	279	45	science	science	NOUN
fuelectenerg-198	279	46	in	in	ADP
fuelectenerg-198	279	47	semiconductor	semiconductor	NOUN
fuelectenerg-198	279	48	processing	processing	NOUN
fuelectenerg-198	279	49	15	15	NUM
fuelectenerg-198	279	50	,	,	PUNCT
fuelectenerg-198	279	51	2012	2012	NUM
fuelectenerg-198	279	52	,	,	PUNCT
fuelectenerg-198	279	53	pp	pp	ADV
fuelectenerg-198	279	54	.	.	PUNCT
fuelectenerg-198	280	1	98–107	98–107	X
fuelectenerg-198	280	2	.	.	PUNCT
fuelectenerg-198	281	1	[	[	X
fuelectenerg-198	281	2	18	18	NUM
fuelectenerg-198	281	3	]	]	X
fuelectenerg-198	281	4	y.	y.	PROPN
fuelectenerg-198	281	5	karmakova	karmakova	PROPN
fuelectenerg-198	281	6	,	,	PUNCT
fuelectenerg-198	281	7	a.	a.	PROPN
fuelectenerg-198	281	8	paskaleva	paskaleva	PROPN
fuelectenerg-198	281	9	and	and	CCONJ
fuelectenerg-198	281	10	e.	e.	PROPN
fuelectenerg-198	281	11	atanassova	atanassova	PROPN
fuelectenerg-198	281	12	,	,	PUNCT
fuelectenerg-198	281	13	“	"	PUNCT
fuelectenerg-198	281	14	interfacial	interfacial	ADJ
fuelectenerg-198	281	15	layers	layer	NOUN
fuelectenerg-198	281	16	in	in	ADP
fuelectenerg-198	281	17	ta2o5	ta2o5	PROPN
fuelectenerg-198	281	18	based	base	VERB
fuelectenerg-198	281	19	stacks	stack	NOUN
fuelectenerg-198	281	20	and	and	CCONJ
fuelectenerg-198	281	21	constituent	constituent	NOUN
fuelectenerg-198	281	22	depth	depth	NOUN
fuelectenerg-198	281	23	profiles	profile	NOUN
fuelectenerg-198	281	24	by	by	ADP
fuelectenerg-198	281	25	spectroscopic	spectroscopic	ADJ
fuelectenerg-198	281	26	ellipsometry	ellipsometry	NOUN
fuelectenerg-198	281	27	”	"	PUNCT
fuelectenerg-198	281	28	,	,	PUNCT
fuelectenerg-198	281	29	appl	appl	PROPN
fuelectenerg-198	281	30	.	.	PUNCT
fuelectenerg-198	281	31	surf	surf	PROPN
fuelectenerg-198	281	32	.	.	PUNCT
fuelectenerg-198	282	1	sci	sci	PROPN
fuelectenerg-198	282	2	.	.	PROPN
fuelectenerg-198	282	3	258	258	NUM
fuelectenerg-198	282	4	,	,	PUNCT
fuelectenerg-198	282	5	2012	2012	NUM
fuelectenerg-198	282	6	,	,	PUNCT
fuelectenerg-198	282	7	pp	pp	ADJ
fuelectenerg-198	282	8	.	.	PUNCT
fuelectenerg-198	282	9	4507–4512	4507–4512	NUM
fuelectenerg-198	282	10	.	.	PUNCT
fuelectenerg-198	283	1	[	[	X
fuelectenerg-198	283	2	19	19	NUM
fuelectenerg-198	283	3	]	]	X
fuelectenerg-198	283	4	e.	e.	PROPN
fuelectenerg-198	283	5	atanassova	atanassova	PROPN
fuelectenerg-198	283	6	,	,	PUNCT
fuelectenerg-198	283	7	a.	a.	PROPN
fuelectenerg-198	283	8	paskaleva	paskaleva	PROPN
fuelectenerg-198	283	9	and	and	CCONJ
fuelectenerg-198	283	10	d.	d.	PROPN
fuelectenerg-198	283	11	spassov	spassov	PROPN
fuelectenerg-198	283	12	,	,	PUNCT
fuelectenerg-198	283	13	“	"	PUNCT
fuelectenerg-198	283	14	doped	dope	VERB
fuelectenerg-198	283	15	ta2o5	ta2o5	PROPN
fuelectenerg-198	283	16	and	and	CCONJ
fuelectenerg-198	283	17	mixed	mixed	ADJ
fuelectenerg-198	283	18	hfo2	hfo2	NOUN
fuelectenerg-198	283	19	–	–	PUNCT
fuelectenerg-198	283	20	ta2o5	ta2o5	PROPN
fuelectenerg-198	283	21	films	film	NOUN
fuelectenerg-198	283	22	for	for	ADP
fuelectenerg-198	283	23	dynamic	dynamic	ADJ
fuelectenerg-198	283	24	memories	memory	NOUN
fuelectenerg-198	283	25	applications	application	NOUN
fuelectenerg-198	283	26	at	at	ADP
fuelectenerg-198	283	27	the	the	DET
fuelectenerg-198	283	28	nanoscale	nanoscale	NOUN
fuelectenerg-198	283	29	”	"	PUNCT
fuelectenerg-198	283	30	,	,	PUNCT
fuelectenerg-198	283	31	microelectron	microelectron	PROPN
fuelectenerg-198	283	32	.	.	PUNCT
fuelectenerg-198	284	1	reliab	reliab	PROPN
fuelectenerg-198	284	2	.	.	PUNCT
fuelectenerg-198	285	1	52	52	NUM
fuelectenerg-198	285	2	,	,	PUNCT
fuelectenerg-198	285	3	2011	2011	NUM
fuelectenerg-198	285	4	,	,	PUNCT
fuelectenerg-198	285	5	pp	pp	ADV
fuelectenerg-198	285	6	.	.	PUNCT
fuelectenerg-198	286	1	642–650	642–650	NUM
fuelectenerg-198	286	2	.	.	PUNCT
fuelectenerg-198	287	1	[	[	X
fuelectenerg-198	287	2	20	20	NUM
fuelectenerg-198	287	3	]	]	PUNCT
fuelectenerg-198	287	4	a.	a.	NOUN
fuelectenerg-198	287	5	paskaleva	paskaleva	PROPN
fuelectenerg-198	287	6	,	,	PUNCT
fuelectenerg-198	287	7	m.	m.	PROPN
fuelectenerg-198	287	8	ťapajna	ťapajna	VERB
fuelectenerg-198	287	9	,	,	PUNCT
fuelectenerg-198	287	10	e.	e.	PROPN
fuelectenerg-198	287	11	dobročka	dobročka	PROPN
fuelectenerg-198	287	12	,	,	PUNCT
fuelectenerg-198	287	13	k.	k.	PROPN
fuelectenerg-198	287	14	hušeková	hušeková	PROPN
fuelectenerg-198	287	15	,	,	PUNCT
fuelectenerg-198	287	16	e.	e.	PROPN
fuelectenerg-198	287	17	atanassova	atanassova	PROPN
fuelectenerg-198	287	18	and	and	CCONJ
fuelectenerg-198	287	19	k.	k.	PROPN
fuelectenerg-198	287	20	fröhlich	fröhlich	PROPN
fuelectenerg-198	287	21	,	,	PUNCT
fuelectenerg-198	287	22	“	"	PUNCT
fuelectenerg-198	287	23	structural	structural	ADJ
fuelectenerg-198	287	24	and	and	CCONJ
fuelectenerg-198	287	25	dielectric	dielectric	ADJ
fuelectenerg-198	287	26	properties	property	NOUN
fuelectenerg-198	287	27	of	of	ADP
fuelectenerg-198	287	28	ru	ru	NOUN
fuelectenerg-198	287	29	-	-	PUNCT
fuelectenerg-198	287	30	based	base	VERB
fuelectenerg-198	287	31	gate	gate	NOUN
fuelectenerg-198	287	32	/	/	SYM
fuelectenerg-198	287	33	hf	hf	ADV
fuelectenerg-198	287	34	-	-	PUNCT
fuelectenerg-198	287	35	doped	dope	VERB
fuelectenerg-198	287	36	ta2o5	ta2o5	PROPN
fuelectenerg-198	287	37	stacks	stack	NOUN
fuelectenerg-198	287	38	”	"	PUNCT
fuelectenerg-198	287	39	,	,	PUNCT
fuelectenerg-198	287	40	appl	appl	PROPN
fuelectenerg-198	287	41	.	.	PUNCT
fuelectenerg-198	288	1	surf	surf	PROPN
fuelectenerg-198	288	2	.	.	PUNCT
fuelectenerg-198	289	1	sci	sci	PROPN
fuelectenerg-198	289	2	.	.	PROPN
fuelectenerg-198	289	3	257	257	NUM
fuelectenerg-198	289	4	,	,	PUNCT
fuelectenerg-198	289	5	2011	2011	NUM
fuelectenerg-198	289	6	,	,	PUNCT
fuelectenerg-198	289	7	pp	pp	ADJ
fuelectenerg-198	289	8	.	.	PUNCT
fuelectenerg-198	290	1	7876–7880	7876–7880	NUM
fuelectenerg-198	290	2	.	.	PUNCT
fuelectenerg-198	291	1	[	[	X
fuelectenerg-198	291	2	21	21	NUM
fuelectenerg-198	291	3	]	]	PUNCT
fuelectenerg-198	291	4	a.	a.	NOUN
fuelectenerg-198	291	5	skeparovski	skeparovski	PROPN
fuelectenerg-198	291	6	,	,	PUNCT
fuelectenerg-198	291	7	n.	n.	PROPN
fuelectenerg-198	291	8	novkovski	novkovski	PROPN
fuelectenerg-198	291	9	,	,	PUNCT
fuelectenerg-198	291	10	e.	e.	PROPN
fuelectenerg-198	291	11	atanassova	atanassova	PROPN
fuelectenerg-198	291	12	,	,	PUNCT
fuelectenerg-198	291	13	a.	a.	NOUN
fuelectenerg-198	291	14	paskaleva	paskaleva	PROPN
fuelectenerg-198	291	15	and	and	CCONJ
fuelectenerg-198	291	16	v.	v.	PROPN
fuelectenerg-198	291	17	k.	k.	PROPN
fuelectenerg-198	291	18	lazarov	lazarov	PROPN
fuelectenerg-198	291	19	,	,	PUNCT
fuelectenerg-198	291	20	“	"	PUNCT
fuelectenerg-198	291	21	effect	effect	NOUN
fuelectenerg-198	291	22	of	of	ADP
fuelectenerg-198	291	23	al	al	PROPN
fuelectenerg-198	291	24	gate	gate	PROPN
fuelectenerg-198	291	25	on	on	ADP
fuelectenerg-198	291	26	the	the	DET
fuelectenerg-198	291	27	electrical	electrical	ADJ
fuelectenerg-198	291	28	behaviour	behaviour	NOUN
fuelectenerg-198	291	29	of	of	ADP
fuelectenerg-198	291	30	al	al	PROPN
fuelectenerg-198	291	31	doped	dope	VERB
fuelectenerg-198	291	32	ta2o5	ta2o5	PROPN
fuelectenerg-198	291	33	stacks	stack	NOUN
fuelectenerg-198	291	34	”	"	PUNCT
fuelectenerg-198	291	35	,	,	PUNCT
fuelectenerg-198	291	36	j.	j.	PROPN
fuelectenerg-198	291	37	phys	phys	PROPN
fuelectenerg-198	291	38	.	.	PUNCT
fuelectenerg-198	292	1	d	d	X
fuelectenerg-198	292	2	:	:	PUNCT
fuelectenerg-198	292	3	appl	appl	ADJ
fuelectenerg-198	292	4	.	.	PUNCT
fuelectenerg-198	293	1	phys	phy	NOUN
fuelectenerg-198	293	2	.	.	PUNCT
fuelectenerg-198	294	1	44	44	NUM
fuelectenerg-198	294	2	,	,	PUNCT
fuelectenerg-198	294	3	2011	2011	NUM
fuelectenerg-198	294	4	,	,	PUNCT
fuelectenerg-198	294	5	pp	pp	ADV
fuelectenerg-198	294	6	.	.	PUNCT
fuelectenerg-198	295	1	235103–235103	235103–235103	NUM
fuelectenerg-198	295	2	-	-	SYM
fuelectenerg-198	295	3	10	10	NUM
fuelectenerg-198	295	4	.	.	PUNCT
fuelectenerg-198	296	1	[	[	X
fuelectenerg-198	296	2	22	22	NUM
fuelectenerg-198	296	3	]	]	PUNCT
fuelectenerg-198	296	4	i.	i.	NOUN
fuelectenerg-198	296	5	manić	manić	PROPN
fuelectenerg-198	296	6	,	,	PUNCT
fuelectenerg-198	296	7	e.	e.	PROPN
fuelectenerg-198	296	8	atanassova	atanassova	PROPN
fuelectenerg-198	296	9	,	,	PUNCT
fuelectenerg-198	296	10	n.	n.	PROPN
fuelectenerg-198	296	11	stojadinović	stojadinović	PROPN
fuelectenerg-198	296	12	,	,	PUNCT
fuelectenerg-198	296	13	d.	d.	PROPN
fuelectenerg-198	296	14	spassov	spassov	PROPN
fuelectenerg-198	296	15	and	and	CCONJ
fuelectenerg-198	296	16	a.	a.	NOUN
fuelectenerg-198	296	17	paskaleva	paskaleva	PROPN
fuelectenerg-198	296	18	,	,	PUNCT
fuelectenerg-198	296	19	“	"	PUNCT
fuelectenerg-198	296	20	hf	hf	ADJ
fuelectenerg-198	296	21	-	-	PUNCT
fuelectenerg-198	296	22	doped	dope	VERB
fuelectenerg-198	296	23	ta2o5	ta2o5	PROPN
fuelectenerg-198	296	24	stacks	stack	NOUN
fuelectenerg-198	296	25	under	under	ADP
fuelectenerg-198	296	26	constant	constant	ADJ
fuelectenerg-198	296	27	voltage	voltage	NOUN
fuelectenerg-198	296	28	stress	stress	NOUN
fuelectenerg-198	296	29	”	"	PUNCT
fuelectenerg-198	296	30	,	,	PUNCT
fuelectenerg-198	296	31	microelectron	microelectron	PROPN
fuelectenerg-198	296	32	.	.	PUNCT
fuelectenerg-198	297	1	eng	eng	PROPN
fuelectenerg-198	297	2	.	.	PROPN
fuelectenerg-198	297	3	88	88	NUM
fuelectenerg-198	297	4	,	,	PUNCT
fuelectenerg-198	297	5	2011	2011	NUM
fuelectenerg-198	297	6	,	,	PUNCT
fuelectenerg-198	297	7	pp	pp	ADV
fuelectenerg-198	297	8	.	.	PUNCT
fuelectenerg-198	298	1	305–313	305–313	NUM
fuelectenerg-198	298	2	.	.	PUNCT
fuelectenerg-198	299	1	[	[	X
fuelectenerg-198	299	2	23	23	NUM
fuelectenerg-198	299	3	]	]	PUNCT
fuelectenerg-198	299	4	d.	d.	NOUN
fuelectenerg-198	299	5	spassov	spassov	PROPN
fuelectenerg-198	299	6	,	,	PUNCT
fuelectenerg-198	299	7	e.	e.	PROPN
fuelectenerg-198	299	8	atanassova	atanassova	PROPN
fuelectenerg-198	299	9	and	and	CCONJ
fuelectenerg-198	299	10	a.	a.	PROPN
fuelectenerg-198	299	11	paskaleva	paskaleva	PROPN
fuelectenerg-198	299	12	,	,	PUNCT
fuelectenerg-198	299	13	“	"	PUNCT
fuelectenerg-198	299	14	lightly	lightly	ADV
fuelectenerg-198	299	15	al	al	PROPN
fuelectenerg-198	299	16	-	-	PUNCT
fuelectenerg-198	299	17	doped	dope	VERB
fuelectenerg-198	299	18	ta2o5	ta2o5	PROPN
fuelectenerg-198	299	19	:	:	PUNCT
fuelectenerg-198	299	20	electrical	electrical	ADJ
fuelectenerg-198	299	21	properties	property	NOUN
fuelectenerg-198	299	22	and	and	CCONJ
fuelectenerg-198	299	23	mechanisms	mechanism	NOUN
fuelectenerg-198	299	24	of	of	ADP
fuelectenerg-198	299	25	conductivity	conductivity	NOUN
fuelectenerg-198	299	26	”	"	PUNCT
fuelectenerg-198	299	27	,	,	PUNCT
fuelectenerg-198	299	28	microelectron	microelectron	PROPN
fuelectenerg-198	299	29	.	.	PUNCT
fuelectenerg-198	300	1	reliab	reliab	PROPN
fuelectenerg-198	300	2	.	.	PUNCT
fuelectenerg-198	301	1	51	51	NUM
fuelectenerg-198	301	2	,	,	PUNCT
fuelectenerg-198	301	3	2011	2011	NUM
fuelectenerg-198	301	4	,	,	PUNCT
fuelectenerg-198	301	5	pp	pp	ADJ
fuelectenerg-198	301	6	.	.	PUNCT
fuelectenerg-198	302	1	2102–2109	2102–2109	NUM
fuelectenerg-198	302	2	.	.	PUNCT
fuelectenerg-198	303	1	272	272	NUM
fuelectenerg-198	303	2	n.	n.	NOUN
fuelectenerg-198	303	3	novkovski	novkovski	NOUN
fuelectenerg-198	303	4	[	[	X
fuelectenerg-198	303	5	24	24	NUM
fuelectenerg-198	303	6	]	]	X
fuelectenerg-198	303	7	n.	n.	NOUN
fuelectenerg-198	303	8	novkovski	novkovski	PROPN
fuelectenerg-198	303	9	and	and	CCONJ
fuelectenerg-198	303	10	e.	e.	PROPN
fuelectenerg-198	303	11	atanassova	atanassova	PROPN
fuelectenerg-198	303	12	,	,	PUNCT
fuelectenerg-198	303	13	“	"	PUNCT
fuelectenerg-198	303	14	charge	charge	VERB
fuelectenerg-198	303	15	trapping	trap	VERB
fuelectenerg-198	303	16	during	during	ADP
fuelectenerg-198	303	17	constant	constant	ADJ
fuelectenerg-198	303	18	current	current	ADJ
fuelectenerg-198	303	19	stress	stress	NOUN
fuelectenerg-198	303	20	in	in	ADP
fuelectenerg-198	303	21	hf	hf	ADV
fuelectenerg-198	303	22	-	-	PUNCT
fuelectenerg-198	303	23	doped	dope	VERB
fuelectenerg-198	303	24	ta2o5	ta2o5	PROPN
fuelectenerg-198	303	25	films	film	NOUN
fuelectenerg-198	303	26	sputtered	sputter	VERB
fuelectenerg-198	303	27	on	on	ADP
fuelectenerg-198	303	28	nitrided	nitrided	ADJ
fuelectenerg-198	303	29	si	si	NOUN
fuelectenerg-198	303	30	”	"	PUNCT
fuelectenerg-198	303	31	,	,	PUNCT
fuelectenerg-198	303	32	thin	thin	ADJ
fuelectenerg-198	303	33	solid	solid	ADJ
fuelectenerg-198	303	34	films	film	NOUN
fuelectenerg-198	303	35	519	519	NUM
fuelectenerg-198	303	36	,	,	PUNCT
fuelectenerg-198	303	37	2011	2011	NUM
fuelectenerg-198	303	38	,	,	PUNCT
fuelectenerg-198	303	39	pp	pp	ADJ
fuelectenerg-198	303	40	.	.	PUNCT
fuelectenerg-198	304	1	2262–2267	2262–2267	NUM
fuelectenerg-198	304	2	.	.	PUNCT
fuelectenerg-198	305	1	[	[	X
fuelectenerg-198	305	2	25	25	NUM
fuelectenerg-198	305	3	]	]	X
fuelectenerg-198	305	4	e.	e.	PROPN
fuelectenerg-198	305	5	atanassova	atanassova	PROPN
fuelectenerg-198	305	6	,	,	PUNCT
fuelectenerg-198	305	7	n.	n.	PROPN
fuelectenerg-198	305	8	novkovski	novkovski	PROPN
fuelectenerg-198	305	9	,	,	PUNCT
fuelectenerg-198	305	10	a.	a.	PROPN
fuelectenerg-198	305	11	paskaleva	paskaleva	PROPN
fuelectenerg-198	305	12	and	and	CCONJ
fuelectenerg-198	305	13	d.	d.	PROPN
fuelectenerg-198	305	14	spassov	spassov	PROPN
fuelectenerg-198	305	15	,	,	PUNCT
fuelectenerg-198	305	16	“	"	PUNCT
fuelectenerg-198	305	17	constant	constant	ADJ
fuelectenerg-198	305	18	current	current	ADJ
fuelectenerg-198	305	19	stress	stress	NOUN
fuelectenerg-198	305	20	-	-	PUNCT
fuelectenerg-198	305	21	induced	induce	VERB
fuelectenerg-198	305	22	leakage	leakage	NOUN
fuelectenerg-198	305	23	current	current	NOUN
fuelectenerg-198	305	24	in	in	ADP
fuelectenerg-198	305	25	mixed	mixed	ADJ
fuelectenerg-198	305	26	hfo2	hfo2	NOUN
fuelectenerg-198	305	27	–	–	PUNCT
fuelectenerg-198	305	28	ta2o5	ta2o5	PROPN
fuelectenerg-198	305	29	stacks	stack	NOUN
fuelectenerg-198	305	30	”	"	PUNCT
fuelectenerg-198	305	31	,	,	PUNCT
fuelectenerg-198	305	32	microelectron	microelectron	PROPN
fuelectenerg-198	305	33	.	.	PUNCT
fuelectenerg-198	305	34	reliab	reliab	PROPN
fuelectenerg-198	305	35	.	.	PUNCT
fuelectenerg-198	306	1	50	50	NUM
fuelectenerg-198	306	2	,	,	PUNCT
fuelectenerg-198	306	3	2010	2010	NUM
fuelectenerg-198	306	4	,	,	PUNCT
fuelectenerg-198	306	5	pp	pp	ADJ
fuelectenerg-198	306	6	.	.	PUNCT
fuelectenerg-198	307	1	794–800	794–800	NUM
fuelectenerg-198	307	2	.	.	PUNCT
fuelectenerg-198	308	1	[	[	X
fuelectenerg-198	308	2	26	26	NUM
fuelectenerg-198	308	3	]	]	PUNCT
fuelectenerg-198	308	4	a.	a.	NOUN
fuelectenerg-198	308	5	paskaleva	paskaleva	PROPN
fuelectenerg-198	308	6	and	and	CCONJ
fuelectenerg-198	308	7	e.	e.	PROPN
fuelectenerg-198	308	8	atanassova	atanassova	PROPN
fuelectenerg-198	308	9	,	,	PUNCT
fuelectenerg-198	308	10	“	"	PUNCT
fuelectenerg-198	308	11	evidence	evidence	NOUN
fuelectenerg-198	308	12	for	for	ADP
fuelectenerg-198	308	13	a	a	DET
fuelectenerg-198	308	14	conduction	conduction	NOUN
fuelectenerg-198	308	15	through	through	ADP
fuelectenerg-198	308	16	shallow	shallow	ADJ
fuelectenerg-198	308	17	traps	trap	NOUN
fuelectenerg-198	308	18	in	in	ADP
fuelectenerg-198	308	19	hf	hf	ADV
fuelectenerg-198	308	20	-	-	PUNCT
fuelectenerg-198	308	21	doped	dope	VERB
fuelectenerg-198	308	22	ta2o5	ta2o5	NOUN
fuelectenerg-198	308	23	”	"	PUNCT
fuelectenerg-198	308	24	,	,	PUNCT
fuelectenerg-198	308	25	mat	mat	NOUN
fuelectenerg-198	308	26	.	.	PUNCT
fuelectenerg-198	308	27	sci	sci	PROPN
fuelectenerg-198	308	28	.	.	PUNCT
fuelectenerg-198	309	1	semicond	semicond	PROPN
fuelectenerg-198	309	2	.	.	PUNCT
fuelectenerg-198	310	1	proc	proc	PROPN
fuelectenerg-198	310	2	.	.	PROPN
fuelectenerg-198	311	1	13	13	NUM
fuelectenerg-198	311	2	,	,	PUNCT
fuelectenerg-198	311	3	2010	2010	NUM
fuelectenerg-198	311	4	,	,	PUNCT
fuelectenerg-198	311	5	pp	pp	ADJ
fuelectenerg-198	311	6	.	.	PUNCT
fuelectenerg-198	312	1	349–355	349–355	NUM
fuelectenerg-198	312	2	.	.	PUNCT
fuelectenerg-198	313	1	[	[	X
fuelectenerg-198	313	2	27	27	NUM
fuelectenerg-198	313	3	]	]	X
fuelectenerg-198	313	4	e.	e.	PROPN
fuelectenerg-198	313	5	atanassova	atanassova	PROPN
fuelectenerg-198	313	6	,	,	PUNCT
fuelectenerg-198	313	7	m.	m.	NOUN
fuelectenerg-198	313	8	georgieva	georgieva	PROPN
fuelectenerg-198	313	9	,	,	PUNCT
fuelectenerg-198	313	10	d.	d.	PROPN
fuelectenerg-198	313	11	spassov	spassov	PROPN
fuelectenerg-198	313	12	and	and	CCONJ
fuelectenerg-198	313	13	a.	a.	NOUN
fuelectenerg-198	313	14	paskaleva	paskaleva	PROPN
fuelectenerg-198	313	15	,	,	PUNCT
fuelectenerg-198	313	16	“	"	PUNCT
fuelectenerg-198	313	17	high	high	ADJ
fuelectenerg-198	313	18	-	-	PUNCT
fuelectenerg-198	313	19	k	k	NOUN
fuelectenerg-198	313	20	hfo2	hfo2	PROPN
fuelectenerg-198	313	21	–	–	PUNCT
fuelectenerg-198	313	22	ta2o5	ta2o5	ADJ
fuelectenerg-198	313	23	mixed	mixed	ADJ
fuelectenerg-198	313	24	layers	layer	NOUN
fuelectenerg-198	313	25	:	:	PUNCT
fuelectenerg-198	313	26	electrical	electrical	ADJ
fuelectenerg-198	313	27	characteristics	characteristic	NOUN
fuelectenerg-198	313	28	and	and	CCONJ
fuelectenerg-198	313	29	mechanisms	mechanism	NOUN
fuelectenerg-198	313	30	of	of	ADP
fuelectenerg-198	313	31	conductivity	conductivity	NOUN
fuelectenerg-198	313	32	”	"	PUNCT
fuelectenerg-198	313	33	,	,	PUNCT
fuelectenerg-198	313	34	microelectron	microelectron	PROPN
fuelectenerg-198	313	35	.	.	PUNCT
fuelectenerg-198	314	1	eng	eng	PROPN
fuelectenerg-198	314	2	.	.	PROPN
fuelectenerg-198	314	3	87	87	NUM
fuelectenerg-198	314	4	,	,	PUNCT
fuelectenerg-198	314	5	2010	2010	NUM
fuelectenerg-198	314	6	,	,	PUNCT
fuelectenerg-198	314	7	pp	pp	ADP
fuelectenerg-198	314	8	.	.	PUNCT
fuelectenerg-198	315	1	668–676	668–676	NUM
fuelectenerg-198	315	2	.	.	PUNCT
fuelectenerg-198	316	1	[	[	X
fuelectenerg-198	316	2	28	28	NUM
fuelectenerg-198	316	3	]	]	X
fuelectenerg-198	316	4	d.	d.	NOUN
fuelectenerg-198	316	5	spassov	spassov	PROPN
fuelectenerg-198	316	6	,	,	PUNCT
fuelectenerg-198	316	7	e.	e.	PROPN
fuelectenerg-198	316	8	atanassova	atanassova	PROPN
fuelectenerg-198	316	9	,	,	PUNCT
fuelectenerg-198	316	10	n.	n.	PROPN
fuelectenerg-198	316	11	novkovski	novkovski	NOUN
fuelectenerg-198	316	12	,	,	PUNCT
fuelectenerg-198	316	13	“	"	PUNCT
fuelectenerg-198	316	14	electrical	electrical	ADJ
fuelectenerg-198	316	15	behaviour	behaviour	NOUN
fuelectenerg-198	316	16	of	of	ADP
fuelectenerg-198	316	17	ti	ti	NOUN
fuelectenerg-198	316	18	-	-	ADJ
fuelectenerg-198	316	19	doped	doped	ADJ
fuelectenerg-198	316	20	ta2o5	ta2o5	PROPN
fuelectenerg-198	316	21	on	on	ADP
fuelectenerg-198	316	22	n2o	n2o	NOUN
fuelectenerg-198	316	23	and	and	CCONJ
fuelectenerg-198	316	24	nh3	nh3	NOUN
fuelectenerg-198	316	25	nitrided	nitride	VERB
fuelectenerg-198	316	26	si	si	NOUN
fuelectenerg-198	316	27	”	"	PUNCT
fuelectenerg-198	316	28	,	,	PUNCT
fuelectenerg-198	316	29	semicond	semicond	PROPN
fuelectenerg-198	316	30	.	.	PUNCT
fuelectenerg-198	317	1	sci	sci	PROPN
fuelectenerg-198	317	2	.	.	PROPN
fuelectenerg-198	317	3	technol	technol	PROPN
fuelectenerg-198	317	4	.	.	PROPN
fuelectenerg-198	317	5	24	24	NUM
fuelectenerg-198	317	6	,	,	PUNCT
fuelectenerg-198	317	7	2009	2009	NUM
fuelectenerg-198	317	8	,	,	PUNCT
fuelectenerg-198	317	9	pp	pp	ADV
fuelectenerg-198	317	10	.	.	PUNCT
fuelectenerg-198	318	1	075024–075024	075024–075024	NUM
fuelectenerg-198	318	2	-	-	SYM
fuelectenerg-198	318	3	10	10	NUM
fuelectenerg-198	318	4	.	.	PUNCT
fuelectenerg-198	319	1	[	[	X
fuelectenerg-198	319	2	29	29	NUM
fuelectenerg-198	319	3	]	]	PUNCT
fuelectenerg-198	319	4	a.	a.	NOUN
fuelectenerg-198	319	5	skeparovski	skeparovski	PROPN
fuelectenerg-198	319	6	,	,	PUNCT
fuelectenerg-198	319	7	n.	n.	PROPN
fuelectenerg-198	319	8	novkovski	novkovski	PROPN
fuelectenerg-198	319	9	,	,	PUNCT
fuelectenerg-198	319	10	e.	e.	PROPN
fuelectenerg-198	319	11	atanassova	atanassova	PROPN
fuelectenerg-198	319	12	,	,	PUNCT
fuelectenerg-198	319	13	d.	d.	PROPN
fuelectenerg-198	319	14	spassov	spassov	PROPN
fuelectenerg-198	319	15	and	and	CCONJ
fuelectenerg-198	319	16	a.	a.	NOUN
fuelectenerg-198	319	17	paskaleva	paskaleva	PROPN
fuelectenerg-198	319	18	,	,	PUNCT
fuelectenerg-198	319	19	“	"	PUNCT
fuelectenerg-198	319	20	temperature	temperature	NOUN
fuelectenerg-198	319	21	dependence	dependence	NOUN
fuelectenerg-198	319	22	of	of	ADP
fuelectenerg-198	319	23	leakage	leakage	NOUN
fuelectenerg-198	319	24	currents	current	NOUN
fuelectenerg-198	319	25	in	in	ADP
fuelectenerg-198	319	26	ti	ti	NOUN
fuelectenerg-198	319	27	doped	dope	VERB
fuelectenerg-198	319	28	ta2o5	ta2o5	PROPN
fuelectenerg-198	319	29	films	film	NOUN
fuelectenerg-198	319	30	on	on	ADP
fuelectenerg-198	319	31	nitrided	nitrided	ADJ
fuelectenerg-198	319	32	silicon	silicon	NOUN
fuelectenerg-198	319	33	”	"	PUNCT
fuelectenerg-198	319	34	,	,	PUNCT
fuelectenerg-198	319	35	j.	j.	PROPN
fuelectenerg-198	319	36	phys	phys	PROPN
fuelectenerg-198	319	37	.	.	PUNCT
fuelectenerg-198	320	1	d	d	X
fuelectenerg-198	320	2	:	:	PUNCT
fuelectenerg-198	320	3	appl	appl	ADJ
fuelectenerg-198	320	4	.	.	PUNCT
fuelectenerg-198	321	1	phys	phy	NOUN
fuelectenerg-198	321	2	.	.	PUNCT
fuelectenerg-198	322	1	42	42	NUM
fuelectenerg-198	322	2	,	,	PUNCT
fuelectenerg-198	322	3	2009	2009	NUM
fuelectenerg-198	322	4	,	,	PUNCT
fuelectenerg-198	322	5	pp	pp	PROPN
fuelectenerg-198	322	6	.	.	PUNCT
fuelectenerg-198	322	7	095302–095302	095302–095302	NOUN
fuelectenerg-198	322	8	-	-	PUNCT
fuelectenerg-198	322	9	8	8	NUM
fuelectenerg-198	322	10	.	.	PUNCT
fuelectenerg-198	323	1	[	[	X
fuelectenerg-198	323	2	30	30	NUM
fuelectenerg-198	323	3	]	]	X
fuelectenerg-198	323	4	a.	a.	NOUN
fuelectenerg-198	323	5	paskaleva	paskaleva	PROPN
fuelectenerg-198	323	6	,	,	PUNCT
fuelectenerg-198	323	7	e.	e.	PROPN
fuelectenerg-198	323	8	atanassova	atanassova	PROPN
fuelectenerg-198	323	9	and	and	CCONJ
fuelectenerg-198	323	10	n.	n.	PROPN
fuelectenerg-198	323	11	novkovski	novkovski	PROPN
fuelectenerg-198	323	12	,	,	PUNCT
fuelectenerg-198	323	13	“	"	PUNCT
fuelectenerg-198	323	14	constant	constant	ADJ
fuelectenerg-198	323	15	current	current	ADJ
fuelectenerg-198	323	16	stress	stress	NOUN
fuelectenerg-198	323	17	of	of	ADP
fuelectenerg-198	323	18	ti	ti	NOUN
fuelectenerg-198	323	19	-	-	ADJ
fuelectenerg-198	323	20	doped	doped	ADJ
fuelectenerg-198	323	21	ta2o5	ta2o5	PROPN
fuelectenerg-198	323	22	on	on	ADP
fuelectenerg-198	323	23	nitrided	nitrided	ADJ
fuelectenerg-198	323	24	si	si	NOUN
fuelectenerg-198	323	25	”	"	PUNCT
fuelectenerg-198	323	26	,	,	PUNCT
fuelectenerg-198	323	27	j.	j.	PROPN
fuelectenerg-198	323	28	phys	phys	PROPN
fuelectenerg-198	323	29	.	.	PUNCT
fuelectenerg-198	324	1	d	d	X
fuelectenerg-198	324	2	:	:	PUNCT
fuelectenerg-198	324	3	appl	appl	ADJ
fuelectenerg-198	324	4	.	.	PUNCT
fuelectenerg-198	325	1	phys	phy	NOUN
fuelectenerg-198	325	2	.	.	PUNCT
fuelectenerg-198	326	1	42	42	NUM
fuelectenerg-198	326	2	,	,	PUNCT
fuelectenerg-198	326	3	2009	2009	NUM
fuelectenerg-198	326	4	,	,	PUNCT
fuelectenerg-198	326	5	pp	pp	ADP
fuelectenerg-198	326	6	.	.	PUNCT
fuelectenerg-198	327	1	025105–025105	025105–025105	NUM
fuelectenerg-198	327	2	-	-	PUNCT
fuelectenerg-198	327	3	8	8	NUM
fuelectenerg-198	327	4	.	.	PUNCT
fuelectenerg-198	328	1	[	[	X
fuelectenerg-198	328	2	31	31	NUM
fuelectenerg-198	328	3	]	]	X
fuelectenerg-198	328	4	n.	n.	NOUN
fuelectenerg-198	328	5	novkovski	novkovski	PROPN
fuelectenerg-198	328	6	,	,	PUNCT
fuelectenerg-198	328	7	“	"	PUNCT
fuelectenerg-198	328	8	analysis	analysis	NOUN
fuelectenerg-198	328	9	of	of	ADP
fuelectenerg-198	328	10	the	the	DET
fuelectenerg-198	328	11	improvement	improvement	NOUN
fuelectenerg-198	328	12	of	of	ADP
fuelectenerg-198	328	13	al	al	PROPN
fuelectenerg-198	328	14	-	-	PUNCT
fuelectenerg-198	328	15	ta2o5	ta2o5	PROPN
fuelectenerg-198	328	16	/	/	SYM
fuelectenerg-198	328	17	sio2	sio2	NOUN
fuelectenerg-198	328	18	-	-	PUNCT
fuelectenerg-198	328	19	si	si	ADJ
fuelectenerg-198	328	20	structures	structure	NOUN
fuelectenerg-198	328	21	reliability	reliability	NOUN
fuelectenerg-198	328	22	by	by	ADP
fuelectenerg-198	328	23	si	si	NOUN
fuelectenerg-198	328	24	substrate	substrate	NOUN
fuelectenerg-198	328	25	plasma	plasma	NOUN
fuelectenerg-198	328	26	nitridation	nitridation	NOUN
fuelectenerg-198	328	27	in	in	ADP
fuelectenerg-198	328	28	n2o	n2o	NOUN
fuelectenerg-198	328	29	”	"	PUNCT
fuelectenerg-198	328	30	,	,	PUNCT
fuelectenerg-198	328	31	thin	thin	ADJ
fuelectenerg-198	328	32	solid	solid	ADJ
fuelectenerg-198	328	33	films	film	NOUN
fuelectenerg-198	328	34	517	517	NUM
fuelectenerg-198	328	35	,	,	PUNCT
fuelectenerg-198	328	36	2009	2009	NUM
fuelectenerg-198	328	37	,	,	PUNCT
fuelectenerg-198	328	38	4394–4401	4394–4401	NOUN
fuelectenerg-198	328	39	.	.	PUNCT
fuelectenerg-198	329	1	[	[	X
fuelectenerg-198	329	2	32	32	NUM
fuelectenerg-198	329	3	]	]	X
fuelectenerg-198	329	4	n.	n.	NOUN
fuelectenerg-198	329	5	novkovski	novkovski	PROPN
fuelectenerg-198	329	6	and	and	CCONJ
fuelectenerg-198	329	7	e.	e.	PROPN
fuelectenerg-198	329	8	atanassova	atanassova	PROPN
fuelectenerg-198	329	9	,	,	PUNCT
fuelectenerg-198	329	10	“	"	PUNCT
fuelectenerg-198	329	11	a	a	DET
fuelectenerg-198	329	12	comprehensive	comprehensive	ADJ
fuelectenerg-198	329	13	model	model	NOUN
fuelectenerg-198	329	14	for	for	ADP
fuelectenerg-198	329	15	the	the	DET
fuelectenerg-198	329	16	i	i	PROPN
fuelectenerg-198	329	17	-	-	PUNCT
fuelectenerg-198	329	18	v	v	PROPN
fuelectenerg-198	329	19	characteristics	characteristic	NOUN
fuelectenerg-198	329	20	of	of	ADP
fuelectenerg-198	329	21	metal	metal	NOUN
fuelectenerg-198	329	22	-	-	PUNCT
fuelectenerg-198	329	23	ta2o5	ta2o5	PROPN
fuelectenerg-198	329	24	/	/	SYM
fuelectenerg-198	329	25	sio2	sio2	PROPN
fuelectenerg-198	329	26	-	-	PUNCT
fuelectenerg-198	329	27	si	si	ADJ
fuelectenerg-198	329	28	structures	structure	NOUN
fuelectenerg-198	329	29	”	"	PUNCT
fuelectenerg-198	329	30	,	,	PUNCT
fuelectenerg-198	329	31	appl	appl	NOUN
fuelectenerg-198	329	32	.	.	PUNCT
fuelectenerg-198	329	33	phys	phy	NOUN
fuelectenerg-198	329	34	.	.	PUNCT
fuelectenerg-198	330	1	a	a	DET
fuelectenerg-198	330	2	83	83	NUM
fuelectenerg-198	330	3	,	,	PUNCT
fuelectenerg-198	330	4	2006	2006	NUM
fuelectenerg-198	330	5	,	,	PUNCT
fuelectenerg-198	330	6	pp	pp	ADV
fuelectenerg-198	330	7	.	.	PUNCT
fuelectenerg-198	331	1	435–445	435–445	NUM
fuelectenerg-198	331	2	.	.	PUNCT
fuelectenerg-198	332	1	[	[	X
fuelectenerg-198	332	2	33	33	NUM
fuelectenerg-198	332	3	]	]	X
fuelectenerg-198	332	4	e.	e.	PROPN
fuelectenerg-198	332	5	rosenbaum	rosenbaum	PROPN
fuelectenerg-198	332	6	and	and	CCONJ
fuelectenerg-198	332	7	l.	l.	PROPN
fuelectenerg-198	332	8	f.	f.	PROPN
fuelectenerg-198	332	9	register	register	PROPN
fuelectenerg-198	332	10	,	,	PUNCT
fuelectenerg-198	332	11	“	"	PUNCT
fuelectenerg-198	332	12	mechanism	mechanism	NOUN
fuelectenerg-198	332	13	of	of	ADP
fuelectenerg-198	332	14	stress	stress	NOUN
fuelectenerg-198	332	15	-	-	PUNCT
fuelectenerg-198	332	16	induced	induce	VERB
fuelectenerg-198	332	17	leakage	leakage	NOUN
fuelectenerg-198	332	18	current	current	NOUN
fuelectenerg-198	332	19	in	in	ADP
fuelectenerg-198	332	20	mos	mos	PROPN
fuelectenerg-198	332	21	capacitors	capacitor	NOUN
fuelectenerg-198	332	22	”	"	PUNCT
fuelectenerg-198	332	23	,	,	PUNCT
fuelectenerg-198	332	24	ieee	ieee	PROPN
fuelectenerg-198	332	25	trans	trans	PROPN
fuelectenerg-198	332	26	.	.	PROPN
fuelectenerg-198	332	27	electron	electron	PROPN
fuelectenerg-198	332	28	dev	dev	PROPN
fuelectenerg-198	332	29	.	.	PROPN
fuelectenerg-198	332	30	44	44	NUM
fuelectenerg-198	332	31	,	,	PUNCT
fuelectenerg-198	332	32	1997	1997	NUM
fuelectenerg-198	332	33	,	,	PUNCT
fuelectenerg-198	332	34	pp	pp	ADV
fuelectenerg-198	332	35	.	.	PUNCT
fuelectenerg-198	333	1	317–323	317–323	NUM
fuelectenerg-198	333	2	.	.	PUNCT
fuelectenerg-198	334	1	[	[	X
fuelectenerg-198	334	2	34	34	NUM
fuelectenerg-198	334	3	]	]	PUNCT
fuelectenerg-198	334	4	m.	m.	NOUN
fuelectenerg-198	334	5	houssa	houssa	PROPN
fuelectenerg-198	334	6	,	,	PUNCT
fuelectenerg-198	334	7	m.	m.	NOUN
fuelectenerg-198	334	8	tuominen	tuominen	NOUN
fuelectenerg-198	334	9	,	,	PUNCT
fuelectenerg-198	334	10	m.	m.	NOUN
fuelectenerg-198	334	11	naili	naili	PROPN
fuelectenerg-198	334	12	,	,	PUNCT
fuelectenerg-198	334	13	v.	v.	ADP
fuelectenerg-198	334	14	afanas’ev	afanas’ev	PROPN
fuelectenerg-198	334	15	,	,	PUNCT
fuelectenerg-198	334	16	a.	a.	NOUN
fuelectenerg-198	334	17	stesmans	stesmans	PROPN
fuelectenerg-198	334	18	,	,	PUNCT
fuelectenerg-198	334	19	s.	s.	PROPN
fuelectenerg-198	334	20	haukka	haukka	VERB
fuelectenerg-198	334	21	and	and	CCONJ
fuelectenerg-198	334	22	m.	m.	NOUN
fuelectenerg-198	334	23	m.	m.	NOUN
fuelectenerg-198	334	24	heyns	heyn	VERB
fuelectenerg-198	334	25	,	,	PUNCT
fuelectenerg-198	334	26	“	"	PUNCT
fuelectenerg-198	334	27	trapassisted	trapassiste	VERB
fuelectenerg-198	334	28	tunneling	tunneling	NOUN
fuelectenerg-198	334	29	in	in	ADP
fuelectenerg-198	334	30	high	high	ADJ
fuelectenerg-198	334	31	permittivity	permittivity	NOUN
fuelectenerg-198	334	32	gate	gate	NOUN
fuelectenerg-198	334	33	dielectric	dielectric	PROPN
fuelectenerg-198	334	34	stacks	stack	NOUN
fuelectenerg-198	334	35	”	"	PUNCT
fuelectenerg-198	334	36	,	,	PUNCT
fuelectenerg-198	334	37	j.	j.	PROPN
fuelectenerg-198	334	38	appl	appl	PROPN
fuelectenerg-198	334	39	.	.	PUNCT
fuelectenerg-198	335	1	phys	phy	NOUN
fuelectenerg-198	335	2	.	.	PUNCT
fuelectenerg-198	336	1	87	87	NUM
fuelectenerg-198	336	2	,	,	PUNCT
fuelectenerg-198	336	3	2000	2000	NUM
fuelectenerg-198	336	4	,	,	PUNCT
fuelectenerg-198	336	5	pp	pp	ADJ
fuelectenerg-198	336	6	.	.	PUNCT
fuelectenerg-198	337	1	8615–8620	8615–8620	NUM
fuelectenerg-198	337	2	.	.	PUNCT
fuelectenerg-198	338	1	[	[	X
fuelectenerg-198	338	2	35	35	NUM
fuelectenerg-198	338	3	]	]	X
fuelectenerg-198	338	4	w.	w.	PROPN
fuelectenerg-198	338	5	s.	s.	PROPN
fuelectenerg-198	338	6	lau	lau	PROPN
fuelectenerg-198	338	7	,	,	PUNCT
fuelectenerg-198	338	8	l.	l.	PROPN
fuelectenerg-198	338	9	zhong	zhong	PROPN
fuelectenerg-198	338	10	,	,	PUNCT
fuelectenerg-198	338	11	allen	allen	PROPN
fuelectenerg-198	338	12	lee	lee	PROPN
fuelectenerg-198	338	13	,	,	PUNCT
fuelectenerg-198	338	14	c.	c.	PROPN
fuelectenerg-198	338	15	h.	h.	PROPN
fuelectenerg-198	338	16	see	see	PROPN
fuelectenerg-198	338	17	,	,	PUNCT
fuelectenerg-198	338	18	taejoon	taejoon	ADV
fuelectenerg-198	338	19	han	han	PROPN
fuelectenerg-198	338	20	,	,	PUNCT
fuelectenerg-198	338	21	n.	n.	PROPN
fuelectenerg-198	338	22	p.	p.	NOUN
fuelectenerg-198	338	23	sandler	sandler	PROPN
fuelectenerg-198	338	24	and	and	CCONJ
fuelectenerg-198	338	25	t.	t.	PROPN
fuelectenerg-198	338	26	c.	c.	PROPN
fuelectenerg-198	338	27	chong	chong	PROPN
fuelectenerg-198	338	28	,	,	PUNCT
fuelectenerg-198	338	29	“	"	PUNCT
fuelectenerg-198	338	30	detection	detection	NOUN
fuelectenerg-198	338	31	of	of	ADP
fuelectenerg-198	338	32	defect	defect	ADJ
fuelectenerg-198	338	33	states	state	NOUN
fuelectenerg-198	338	34	responsible	responsible	ADJ
fuelectenerg-198	338	35	for	for	ADP
fuelectenerg-198	338	36	leakage	leakage	NOUN
fuelectenerg-198	338	37	current	current	ADJ
fuelectenerg-198	338	38	in	in	ADP
fuelectenerg-198	338	39	ultrathin	ultrathin	ADJ
fuelectenerg-198	338	40	tantalum	tantalum	NOUN
fuelectenerg-198	338	41	pentoxide	pentoxide	NOUN
fuelectenerg-198	338	42	(	(	PUNCT
fuelectenerg-198	338	43	ta2o5	ta2o5	PROPN
fuelectenerg-198	338	44	)	)	PUNCT
fuelectenerg-198	338	45	films	film	NOUN
fuelectenerg-198	338	46	by	by	ADP
fuelectenerg-198	338	47	zero	zero	NUM
fuelectenerg-198	338	48	-	-	PUNCT
fuelectenerg-198	338	49	bias	bias	NOUN
fuelectenerg-198	338	50	thermally	thermally	ADV
fuelectenerg-198	338	51	stimulated	stimulate	VERB
fuelectenerg-198	338	52	current	current	ADJ
fuelectenerg-198	338	53	spectroscopy	spectroscopy	NOUN
fuelectenerg-198	338	54	”	"	PUNCT
fuelectenerg-198	338	55	,	,	PUNCT
fuelectenerg-198	338	56	appl	appl	NOUN
fuelectenerg-198	338	57	.	.	PUNCT
fuelectenerg-198	339	1	phys	phy	NOUN
fuelectenerg-198	339	2	.	.	PUNCT
fuelectenerg-198	340	1	lett	lett	PROPN
fuelectenerg-198	340	2	.	.	PUNCT
fuelectenerg-198	341	1	71	71	NUM
fuelectenerg-198	341	2	,	,	PUNCT
fuelectenerg-198	341	3	1997	1997	NUM
fuelectenerg-198	341	4	,	,	PUNCT
fuelectenerg-198	341	5	pp	pp	ADP
fuelectenerg-198	341	6	.	.	PUNCT
fuelectenerg-198	342	1	500–502	500–502	NUM
fuelectenerg-198	342	2	.	.	PUNCT
fuelectenerg-198	343	1	[	[	X
fuelectenerg-198	343	2	36	36	NUM
fuelectenerg-198	343	3	]	]	X
fuelectenerg-198	343	4	w.	w.	PROPN
fuelectenerg-198	343	5	s.	s.	PROPN
fuelectenerg-198	343	6	lau	lau	PROPN
fuelectenerg-198	343	7	,	,	PUNCT
fuelectenerg-198	343	8	l.	l.	PROPN
fuelectenerg-198	343	9	l.	l.	PROPN
fuelectenerg-198	343	10	leong	leong	PROPN
fuelectenerg-198	343	11	,	,	PUNCT
fuelectenerg-198	343	12	t.	t.	PROPN
fuelectenerg-198	343	13	han	han	PROPN
fuelectenerg-198	343	14	and	and	CCONJ
fuelectenerg-198	343	15	n.	n.	PROPN
fuelectenerg-198	343	16	p.	p.	PROPN
fuelectenerg-198	343	17	sandler	sandler	NOUN
fuelectenerg-198	343	18	,	,	PUNCT
fuelectenerg-198	343	19	“	"	PUNCT
fuelectenerg-198	343	20	detection	detection	NOUN
fuelectenerg-198	343	21	of	of	ADP
fuelectenerg-198	343	22	oxygen	oxygen	NOUN
fuelectenerg-198	343	23	vacancy	vacancy	NOUN
fuelectenerg-198	343	24	defect	defect	NOUN
fuelectenerg-198	343	25	states	state	NOUN
fuelectenerg-198	343	26	in	in	ADP
fuelectenerg-198	343	27	capacitors	capacitor	NOUN
fuelectenerg-198	343	28	with	with	ADP
fuelectenerg-198	343	29	ultrathin	ultrathin	ADJ
fuelectenerg-198	343	30	ta2o5	ta2o5	PROPN
fuelectenerg-198	343	31	films	film	NOUN
fuelectenerg-198	343	32	by	by	ADP
fuelectenerg-198	343	33	zero	zero	NUM
fuelectenerg-198	343	34	-	-	PUNCT
fuelectenerg-198	343	35	bias	bias	NOUN
fuelectenerg-198	343	36	thermally	thermally	ADV
fuelectenerg-198	343	37	stimulated	stimulate	VERB
fuelectenerg-198	343	38	current	current	ADJ
fuelectenerg-198	343	39	spectroscopy	spectroscopy	NOUN
fuelectenerg-198	343	40	”	"	PUNCT
fuelectenerg-198	343	41	,	,	PUNCT
fuelectenerg-198	343	42	appl	appl	NOUN
fuelectenerg-198	343	43	.	.	PUNCT
fuelectenerg-198	344	1	phys	phy	NOUN
fuelectenerg-198	344	2	.	.	PUNCT
fuelectenerg-198	345	1	lett	lett	PROPN
fuelectenerg-198	345	2	.	.	PROPN
fuelectenerg-198	345	3	83	83	NUM
fuelectenerg-198	345	4	,	,	PUNCT
fuelectenerg-198	345	5	2003	2003	NUM
fuelectenerg-198	345	6	,	,	PUNCT
fuelectenerg-198	345	7	pp	pp	ADJ
fuelectenerg-198	345	8	.	.	PUNCT
fuelectenerg-198	346	1	2835–2837	2835–2837	NUM
fuelectenerg-198	346	2	.	.	PUNCT
fuelectenerg-198	347	1	[	[	X
fuelectenerg-198	347	2	37	37	NUM
fuelectenerg-198	347	3	]	]	X
fuelectenerg-198	347	4	n.	n.	NOUN
fuelectenerg-198	347	5	novkovski	novkovski	PROPN
fuelectenerg-198	347	6	,	,	PUNCT
fuelectenerg-198	347	7	a.	a.	NOUN
fuelectenerg-198	347	8	skeparovski	skeparovski	PROPN
fuelectenerg-198	347	9	and	and	CCONJ
fuelectenerg-198	347	10	e.	e.	PROPN
fuelectenerg-198	347	11	atanassova	atanassova	PROPN
fuelectenerg-198	347	12	,	,	PUNCT
fuelectenerg-198	347	13	“	"	PUNCT
fuelectenerg-198	347	14	charge	charge	VERB
fuelectenerg-198	347	15	trapping	trap	VERB
fuelectenerg-198	347	16	effect	effect	NOUN
fuelectenerg-198	347	17	at	at	ADP
fuelectenerg-198	347	18	the	the	DET
fuelectenerg-198	347	19	contact	contact	NOUN
fuelectenerg-198	347	20	between	between	ADP
fuelectenerg-198	347	21	a	a	DET
fuelectenerg-198	347	22	highwork	highwork	NOUN
fuelectenerg-198	347	23	-	-	PUNCT
fuelectenerg-198	347	24	function	function	NOUN
fuelectenerg-198	347	25	metal	metal	NOUN
fuelectenerg-198	347	26	and	and	CCONJ
fuelectenerg-198	347	27	ta2o5	ta2o5	PROPN
fuelectenerg-198	347	28	high	high	ADJ
fuelectenerg-198	347	29	-	-	PUNCT
fuelectenerg-198	347	30	k	k	NOUN
fuelectenerg-198	347	31	dielectric	dielectric	NOUN
fuelectenerg-198	347	32	”	"	PUNCT
fuelectenerg-198	347	33	,	,	PUNCT
fuelectenerg-198	347	34	j.	j.	PROPN
fuelectenerg-198	347	35	phys	phys	PROPN
fuelectenerg-198	347	36	.	.	PUNCT
fuelectenerg-198	348	1	d	d	X
fuelectenerg-198	348	2	:	:	PUNCT
fuelectenerg-198	348	3	appl	appl	ADJ
fuelectenerg-198	348	4	.	.	PUNCT
fuelectenerg-198	349	1	phys	phy	NOUN
fuelectenerg-198	349	2	.	.	PUNCT
fuelectenerg-198	350	1	41	41	NUM
fuelectenerg-198	350	2	,	,	PUNCT
fuelectenerg-198	350	3	2008	2008	NUM
fuelectenerg-198	350	4	,	,	PUNCT
fuelectenerg-198	350	5	pp	pp	ADJ
fuelectenerg-198	350	6	.	.	PUNCT
fuelectenerg-198	351	1	105302–105302	105302–105302	NUM
fuelectenerg-198	351	2	-	-	SYM
fuelectenerg-198	351	3	4	4	NUM
fuelectenerg-198	351	4	.	.	PUNCT
fuelectenerg-198	352	1	[	[	X
fuelectenerg-198	352	2	38	38	NUM
fuelectenerg-198	352	3	]	]	PUNCT
fuelectenerg-198	352	4	l.	l.	PROPN
fuelectenerg-198	352	5	stojanovska	stojanovska	PROPN
fuelectenerg-198	352	6	-	-	PUNCT
fuelectenerg-198	352	7	georgievska	georgievska	NOUN
fuelectenerg-198	352	8	,	,	PUNCT
fuelectenerg-198	352	9	n.	n.	NOUN
fuelectenerg-198	352	10	novkovski	novkovski	PROPN
fuelectenerg-198	352	11	and	and	CCONJ
fuelectenerg-198	352	12	e.	e.	PROPN
fuelectenerg-198	352	13	atanassova	atanassova	PROPN
fuelectenerg-198	352	14	,	,	PUNCT
fuelectenerg-198	352	15	“	"	PUNCT
fuelectenerg-198	352	16	charge	charge	VERB
fuelectenerg-198	352	17	trapping	trap	VERB
fuelectenerg-198	352	18	at	at	ADP
fuelectenerg-198	352	19	pt	pt	NOUN
fuelectenerg-198	352	20	/	/	SYM
fuelectenerg-198	352	21	high	high	ADJ
fuelectenerg-198	352	22	-	-	PUNCT
fuelectenerg-198	352	23	k	k	NOUN
fuelectenerg-198	352	24	dielectric	dielectric	NOUN
fuelectenerg-198	352	25	(	(	PUNCT
fuelectenerg-198	352	26	ta2o5	ta2o5	NOUN
fuelectenerg-198	352	27	)	)	PUNCT
fuelectenerg-198	352	28	interface	interface	NOUN
fuelectenerg-198	352	29	”	"	PUNCT
fuelectenerg-198	352	30	,	,	PUNCT
fuelectenerg-198	352	31	physica	physica	NOUN
fuelectenerg-198	352	32	b	b	PROPN
fuelectenerg-198	352	33	:	:	PUNCT
fuelectenerg-198	352	34	condensed	condense	VERB
fuelectenerg-198	352	35	matter	matter	NOUN
fuelectenerg-198	352	36	406	406	NUM
fuelectenerg-198	352	37	,	,	PUNCT
fuelectenerg-198	352	38	pp	pp	ADJ
fuelectenerg-198	352	39	.	.	PUNCT
fuelectenerg-198	353	1	3348	3348	NUM
fuelectenerg-198	353	2	-	-	SYM
fuelectenerg-198	353	3	3353	3353	NUM
fuelectenerg-198	353	4	(	(	PUNCT
fuelectenerg-198	353	5	2011	2011	NUM
fuelectenerg-198	353	6	)	)	PUNCT
fuelectenerg-198	353	7	.	.	PUNCT
fuelectenerg-198	354	1	[	[	X
fuelectenerg-198	354	2	39	39	NUM
fuelectenerg-198	354	3	]	]	X
fuelectenerg-198	354	4	l.s	l.s	NOUN
fuelectenerg-198	354	5	.	.	NOUN
fuelectenerg-198	354	6	georgievska	georgievska	PROPN
fuelectenerg-198	354	7	,	,	PUNCT
fuelectenerg-198	354	8	n.	n.	NOUN
fuelectenerg-198	354	9	novkovski	novkovski	PROPN
fuelectenerg-198	354	10	and	and	CCONJ
fuelectenerg-198	354	11	e.	e.	PROPN
fuelectenerg-198	354	12	atanassova	atanassova	PROPN
fuelectenerg-198	354	13	,	,	PUNCT
fuelectenerg-198	354	14	“	"	PUNCT
fuelectenerg-198	354	15	charge	charge	VERB
fuelectenerg-198	354	16	trapping	trap	VERB
fuelectenerg-198	354	17	at	at	ADP
fuelectenerg-198	354	18	low	low	ADJ
fuelectenerg-198	354	19	injection	injection	NOUN
fuelectenerg-198	354	20	currents	current	NOUN
fuelectenerg-198	354	21	in	in	ADP
fuelectenerg-198	354	22	(	(	PUNCT
fuelectenerg-198	354	23	tin	tin	NOUN
fuelectenerg-198	354	24	,	,	PUNCT
fuelectenerg-198	354	25	mo	mo	NOUN
fuelectenerg-198	354	26	,	,	PUNCT
fuelectenerg-198	354	27	pt)/ta2o5	pt)/ta2o5	ADJ
fuelectenerg-198	354	28	:	:	PUNCT
fuelectenerg-198	354	29	hf	hf	ADJ
fuelectenerg-198	354	30	/	/	SYM
fuelectenerg-198	354	31	sio2	sio2	PROPN
fuelectenerg-198	354	32	/	/	SYM
fuelectenerg-198	354	33	si	si	PROPN
fuelectenerg-198	354	34	structures	structure	NOUN
fuelectenerg-198	354	35	”	"	PUNCT
fuelectenerg-198	354	36	,	,	PUNCT
fuelectenerg-198	354	37	2012	2012	NUM
fuelectenerg-198	354	38	28th	28th	ADJ
fuelectenerg-198	354	39	international	international	ADJ
fuelectenerg-198	354	40	conference	conference	NOUN
fuelectenerg-198	354	41	on	on	ADP
fuelectenerg-198	354	42	microelectronics	microelectronic	NOUN
fuelectenerg-198	354	43	,	,	PUNCT
fuelectenerg-198	354	44	proceedings	proceeding	NOUN
fuelectenerg-198	354	45	,	,	PUNCT
fuelectenerg-198	354	46	miel2012	miel2012	PROPN
fuelectenerg-198	354	47	,	,	PUNCT
fuelectenerg-198	354	48	pp	pp	ADV
fuelectenerg-198	354	49	.	.	PUNCT
fuelectenerg-198	355	1	331	331	NUM
fuelectenerg-198	355	2	-	-	SYM
fuelectenerg-198	355	3	334	334	NUM
fuelectenerg-198	355	4	[	[	X
fuelectenerg-198	355	5	40	40	NUM
fuelectenerg-198	355	6	]	]	PUNCT
fuelectenerg-198	355	7	f.-c	f.-c	NOUN
fuelectenerg-198	355	8	.	.	PUNCT
fuelectenerg-198	356	1	chiu	chiu	PROPN
fuelectenerg-198	356	2	,	,	PUNCT
fuelectenerg-198	356	3	j.-j	j.-j	PROPN
fuelectenerg-198	356	4	.	.	PUNCT
fuelectenerg-198	357	1	wang	wang	PROPN
fuelectenerg-198	357	2	,	,	PUNCT
fuelectenerg-198	357	3	j.	j.	PROPN
fuelectenerg-198	357	4	y.	y.	PROPN
fuelectenerg-198	357	5	lee	lee	PROPN
fuelectenerg-198	357	6	and	and	CCONJ
fuelectenerg-198	357	7	s.	s.	PROPN
fuelectenerg-198	357	8	c.	c.	PROPN
fuelectenerg-198	357	9	wu	wu	PROPN
fuelectenerg-198	357	10	,	,	PUNCT
fuelectenerg-198	357	11	“	"	PUNCT
fuelectenerg-198	357	12	leakage	leakage	NOUN
fuelectenerg-198	357	13	currents	current	NOUN
fuelectenerg-198	357	14	in	in	ADP
fuelectenerg-198	357	15	amorphous	amorphous	ADJ
fuelectenerg-198	357	16	ta2o5	ta2o5	PROPN
fuelectenerg-198	357	17	thin	thin	ADJ
fuelectenerg-198	357	18	films	film	NOUN
fuelectenerg-198	357	19	”	"	PUNCT
fuelectenerg-198	357	20	,	,	PUNCT
fuelectenerg-198	357	21	j.	j.	PROPN
fuelectenerg-198	357	22	appl	appl	PROPN
fuelectenerg-198	357	23	.	.	PUNCT
fuelectenerg-198	358	1	phys	phy	NOUN
fuelectenerg-198	358	2	.	.	PUNCT
fuelectenerg-198	359	1	81	81	NUM
fuelectenerg-198	359	2	,	,	PUNCT
fuelectenerg-198	359	3	1997	1997	NUM
fuelectenerg-198	359	4	,	,	PUNCT
fuelectenerg-198	359	5	pp	pp	ADJ
fuelectenerg-198	359	6	.	.	PUNCT
fuelectenerg-198	360	1	6911	6911	NUM
fuelectenerg-198	360	2	-	-	SYM
fuelectenerg-198	360	3	6915	6915	NUM
fuelectenerg-198	360	4	.	.	PUNCT
fuelectenerg-198	361	1	[	[	X
fuelectenerg-198	361	2	41	41	NUM
fuelectenerg-198	361	3	]	]	X
fuelectenerg-198	361	4	o.	o.	PROPN
fuelectenerg-198	361	5	blank	blank	PROPN
fuelectenerg-198	361	6	,	,	PUNCT
fuelectenerg-198	361	7	h.	h.	PROPN
fuelectenerg-198	361	8	reisinger	reisinger	PROPN
fuelectenerg-198	361	9	,	,	PUNCT
fuelectenerg-198	361	10	r.	r.	PROPN
fuelectenerg-198	361	11	stengl	stengl	PROPN
fuelectenerg-198	361	12	,	,	PUNCT
fuelectenerg-198	361	13	m.	m.	NOUN
fuelectenerg-198	361	14	gutsche	gutsche	PROPN
fuelectenerg-198	361	15	,	,	PUNCT
fuelectenerg-198	361	16	f.	f.	PROPN
fuelectenerg-198	361	17	wiest	wiest	PROPN
fuelectenerg-198	361	18	,	,	PUNCT
fuelectenerg-198	361	19	v.	v.	CCONJ
fuelectenerg-198	361	20	capodieci	capodieci	PROPN
fuelectenerg-198	361	21	,	,	PUNCT
fuelectenerg-198	361	22	j.	j.	PROPN
fuelectenerg-198	361	23	schulze	schulze	PROPN
fuelectenerg-198	361	24	and	and	CCONJ
fuelectenerg-198	361	25	i.	i.	PROPN
fuelectenerg-198	361	26	eisele	eisele	PROPN
fuelectenerg-198	361	27	,	,	PUNCT
fuelectenerg-198	361	28	“	"	PUNCT
fuelectenerg-198	361	29	a	a	DET
fuelectenerg-198	361	30	model	model	NOUN
fuelectenerg-198	361	31	for	for	ADP
fuelectenerg-198	361	32	multistep	multistep	ADJ
fuelectenerg-198	361	33	trap	trap	NOUN
fuelectenerg-198	361	34	-	-	PUNCT
fuelectenerg-198	361	35	assisted	assist	VERB
fuelectenerg-198	361	36	tunneling	tunneling	NOUN
fuelectenerg-198	361	37	in	in	ADP
fuelectenerg-198	361	38	thin	thin	ADJ
fuelectenerg-198	361	39	high	high	ADJ
fuelectenerg-198	361	40	-	-	PUNCT
fuelectenerg-198	361	41	k	k	NOUN
fuelectenerg-198	361	42	dielectrics	dielectric	NOUN
fuelectenerg-198	361	43	”	"	PUNCT
fuelectenerg-198	361	44	,	,	PUNCT
fuelectenerg-198	361	45	j.	j.	PROPN
fuelectenerg-198	361	46	appl	appl	PROPN
fuelectenerg-198	361	47	.	.	PUNCT
fuelectenerg-198	362	1	phys	phy	NOUN
fuelectenerg-198	362	2	.	.	PUNCT
fuelectenerg-198	363	1	97	97	NUM
fuelectenerg-198	363	2	,	,	PUNCT
fuelectenerg-198	363	3	2005	2005	NUM
fuelectenerg-198	363	4	,	,	PUNCT
fuelectenerg-198	363	5	pp	pp	ADJ
fuelectenerg-198	363	6	.	.	PUNCT
fuelectenerg-198	364	1	044107	044107	NUM
fuelectenerg-198	364	2	–	–	PUNCT
fuelectenerg-198	364	3	044107	044107	NUM
fuelectenerg-198	364	4	-	-	SYM
fuelectenerg-198	364	5	7	7	NUM
fuelectenerg-198	364	6	.	.	PUNCT
fuelectenerg-198	365	1	[	[	X
fuelectenerg-198	365	2	42	42	NUM
fuelectenerg-198	365	3	]	]	X
fuelectenerg-198	365	4	e.	e.	PROPN
fuelectenerg-198	365	5	atanassova	atanassova	PROPN
fuelectenerg-198	365	6	,	,	PUNCT
fuelectenerg-198	365	7	d.	d.	PROPN
fuelectenerg-198	365	8	spassov	spassov	PROPN
fuelectenerg-198	365	9	,	,	PUNCT
fuelectenerg-198	365	10	a.	a.	PROPN
fuelectenerg-198	365	11	paskaleva	paskaleva	PROPN
fuelectenerg-198	365	12	,	,	PUNCT
fuelectenerg-198	365	13	j.	j.	PROPN
fuelectenerg-198	365	14	koprinarova	koprinarova	PROPN
fuelectenerg-198	365	15	and	and	CCONJ
fuelectenerg-198	365	16	m.	m.	PROPN
fuelectenerg-198	365	17	gueorguieva	gueorguieva	PROPN
fuelectenerg-198	365	18	,	,	PUNCT
fuelectenerg-198	365	19	“	"	PUNCT
fuelectenerg-198	365	20	influence	influence	NOUN
fuelectenerg-198	365	21	of	of	ADP
fuelectenerg-198	365	22	oxidation	oxidation	NOUN
fuelectenerg-198	365	23	temperature	temperature	NOUN
fuelectenerg-198	365	24	on	on	ADP
fuelectenerg-198	365	25	the	the	DET
fuelectenerg-198	365	26	microstructure	microstructure	ADJ
fuelectenerg-198	365	27	and	and	CCONJ
fuelectenerg-198	365	28	electrical	electrical	ADJ
fuelectenerg-198	365	29	properties	property	NOUN
fuelectenerg-198	365	30	of	of	ADP
fuelectenerg-198	365	31	ta2o5	ta2o5	PROPN
fuelectenerg-198	365	32	on	on	ADP
fuelectenerg-198	365	33	si	si	NOUN
fuelectenerg-198	365	34	”	"	PUNCT
fuelectenerg-198	365	35	,	,	PUNCT
fuelectenerg-198	365	36	microel	microel	ADV
fuelectenerg-198	365	37	.	.	PUNCT
fuelectenerg-198	366	1	j.	j.	PROPN
fuelectenerg-198	366	2	33	33	NUM
fuelectenerg-198	366	3	,	,	PUNCT
fuelectenerg-198	366	4	2002	2002	NUM
fuelectenerg-198	366	5	,	,	PUNCT
fuelectenerg-198	366	6	pp	pp	ADV
fuelectenerg-198	366	7	.	.	PUNCT
fuelectenerg-198	367	1	907–920	907–920	NUM
fuelectenerg-198	367	2	.	.	PUNCT
fuelectenerg-198	368	1	[	[	X
fuelectenerg-198	368	2	43	43	NUM
fuelectenerg-198	368	3	]	]	PUNCT
fuelectenerg-198	368	4	m.	m.	NOUN
fuelectenerg-198	368	5	lenzlinger	lenzlinger	NOUN
fuelectenerg-198	368	6	and	and	CCONJ
fuelectenerg-198	368	7	e.	e.	PROPN
fuelectenerg-198	368	8	h.	h.	PROPN
fuelectenerg-198	368	9	snow	snow	PROPN
fuelectenerg-198	368	10	,	,	PUNCT
fuelectenerg-198	368	11	“	"	PUNCT
fuelectenerg-198	368	12	fowler	fowler	PROPN
fuelectenerg-198	368	13	-	-	PUNCT
fuelectenerg-198	368	14	nordheim	nordheim	PROPN
fuelectenerg-198	368	15	tunneling	tunnel	VERB
fuelectenerg-198	368	16	into	into	ADP
fuelectenerg-198	368	17	thermally	thermally	ADV
fuelectenerg-198	368	18	grown	grow	VERB
fuelectenerg-198	368	19	sio2	sio2	PROPN
fuelectenerg-198	368	20	”	"	PUNCT
fuelectenerg-198	368	21	,	,	PUNCT
fuelectenerg-198	368	22	j.	j.	PROPN
fuelectenerg-198	368	23	appl	appl	PROPN
fuelectenerg-198	368	24	.	.	PUNCT
fuelectenerg-198	369	1	phys	phy	NOUN
fuelectenerg-198	369	2	.	.	PUNCT
fuelectenerg-198	370	1	40	40	NUM
fuelectenerg-198	370	2	,	,	PUNCT
fuelectenerg-198	370	3	1969	1969	NUM
fuelectenerg-198	370	4	,	,	PUNCT
fuelectenerg-198	370	5	pp	pp	ADV
fuelectenerg-198	370	6	.	.	PUNCT
fuelectenerg-198	371	1	278	278	NUM
fuelectenerg-198	371	2	-	-	SYM
fuelectenerg-198	371	3	283	283	NUM
fuelectenerg-198	371	4	.	.	PUNCT
fuelectenerg-198	372	1	[	[	X
fuelectenerg-198	372	2	44	44	NUM
fuelectenerg-198	372	3	]	]	X
fuelectenerg-198	372	4	n.	n.	NOUN
fuelectenerg-198	372	5	novkovski	novkovski	PROPN
fuelectenerg-198	372	6	and	and	CCONJ
fuelectenerg-198	372	7	e.	e.	PROPN
fuelectenerg-198	372	8	atanassova	atanassova	PROPN
fuelectenerg-198	372	9	,	,	PUNCT
fuelectenerg-198	372	10	“	"	PUNCT
fuelectenerg-198	372	11	injection	injection	NOUN
fuelectenerg-198	372	12	of	of	ADP
fuelectenerg-198	372	13	holes	hole	NOUN
fuelectenerg-198	372	14	from	from	ADP
fuelectenerg-198	372	15	the	the	DET
fuelectenerg-198	372	16	silicon	silicon	NOUN
fuelectenerg-198	372	17	substrate	substrate	NOUN
fuelectenerg-198	372	18	in	in	ADP
fuelectenerg-198	372	19	ta2o5	ta2o5	PROPN
fuelectenerg-198	372	20	films	film	NOUN
fuelectenerg-198	372	21	grown	grow	VERB
fuelectenerg-198	372	22	on	on	ADP
fuelectenerg-198	372	23	silicon	silicon	NOUN
fuelectenerg-198	372	24	”	"	PUNCT
fuelectenerg-198	372	25	,	,	PUNCT
fuelectenerg-198	372	26	appl	appl	PROPN
fuelectenerg-198	372	27	.	.	PUNCT
fuelectenerg-198	373	1	phys	phy	NOUN
fuelectenerg-198	373	2	.	.	PUNCT
fuelectenerg-198	374	1	lett	lett	PROPN
fuelectenerg-198	374	2	.	.	PROPN
fuelectenerg-198	374	3	85	85	NUM
fuelectenerg-198	374	4	,	,	PUNCT
fuelectenerg-198	374	5	2004	2004	NUM
fuelectenerg-198	374	6	,	,	PUNCT
fuelectenerg-198	374	7	pp	pp	ADP
fuelectenerg-198	374	8	.	.	PUNCT
fuelectenerg-198	375	1	3142	3142	NUM
fuelectenerg-198	375	2	-	-	SYM
fuelectenerg-198	375	3	3144	3144	NUM
fuelectenerg-198	375	4	.	.	PUNCT
fuelectenerg-198	376	1	[	[	X
fuelectenerg-198	376	2	45	45	NUM
fuelectenerg-198	376	3	]	]	PUNCT
fuelectenerg-198	376	4	c.	c.	PROPN
fuelectenerg-198	376	5	chaneliere	chaneliere	PROPN
fuelectenerg-198	376	6	,	,	PUNCT
fuelectenerg-198	376	7	j.	j.	PROPN
fuelectenerg-198	376	8	l.	l.	PROPN
fuelectenerg-198	376	9	autran	autran	PROPN
fuelectenerg-198	376	10	and	and	CCONJ
fuelectenerg-198	376	11	r.a.b	r.a.b	PROPN
fuelectenerg-198	376	12	.	.	PROPN
fuelectenerg-198	376	13	devine	devine	PROPN
fuelectenerg-198	376	14	,	,	PUNCT
fuelectenerg-198	376	15	“	"	PUNCT
fuelectenerg-198	376	16	conduction	conduction	NOUN
fuelectenerg-198	376	17	mechanisms	mechanism	NOUN
fuelectenerg-198	376	18	in	in	ADP
fuelectenerg-198	376	19	ta2o5	ta2o5	PROPN
fuelectenerg-198	376	20	/	/	SYM
fuelectenerg-198	376	21	sio2	sio2	NOUN
fuelectenerg-198	376	22	and	and	CCONJ
fuelectenerg-198	376	23	ta2o5	ta2o5	PROPN
fuelectenerg-198	376	24	/	/	SYM
fuelectenerg-198	376	25	si3n4	si3n4	PROPN
fuelectenerg-198	376	26	stacked	stack	VERB
fuelectenerg-198	376	27	structures	structure	NOUN
fuelectenerg-198	376	28	on	on	ADP
fuelectenerg-198	376	29	si	si	NOUN
fuelectenerg-198	376	30	”	"	PUNCT
fuelectenerg-198	376	31	,	,	PUNCT
fuelectenerg-198	376	32	j.	j.	PROPN
fuelectenerg-198	376	33	appl	appl	PROPN
fuelectenerg-198	376	34	.	.	PUNCT
fuelectenerg-198	377	1	phys	phy	NOUN
fuelectenerg-198	377	2	.	.	PUNCT
fuelectenerg-198	378	1	86	86	NUM
fuelectenerg-198	378	2	,	,	PUNCT
fuelectenerg-198	378	3	1999	1999	NUM
fuelectenerg-198	378	4	,	,	PUNCT
fuelectenerg-198	378	5	pp	pp	ADJ
fuelectenerg-198	378	6	.	.	PUNCT
fuelectenerg-198	379	1	480–486	480–486	NUM
fuelectenerg-198	379	2	.	.	PUNCT
fuelectenerg-198	380	1	[	[	X
fuelectenerg-198	380	2	46	46	NUM
fuelectenerg-198	380	3	]	]	X
fuelectenerg-198	380	4	m.	m.	NOUN
fuelectenerg-198	380	5	v.	v.	CCONJ
fuelectenerg-198	380	6	fischetti	fischetti	PROPN
fuelectenerg-198	380	7	and	and	CCONJ
fuelectenerg-198	380	8	d.	d.	PROPN
fuelectenerg-198	380	9	j.	j.	PROPN
fuelectenerg-198	380	10	dimaria	dimaria	PROPN
fuelectenerg-198	380	11	,	,	PUNCT
fuelectenerg-198	380	12	“	"	PUNCT
fuelectenerg-198	380	13	hot	hot	ADJ
fuelectenerg-198	380	14	electrons	electron	NOUN
fuelectenerg-198	380	15	in	in	ADP
fuelectenerg-198	380	16	sio2	sio2	PROPN
fuelectenerg-198	380	17	:	:	PUNCT
fuelectenerg-198	380	18	ballistic	ballistic	ADJ
fuelectenerg-198	380	19	to	to	ADP
fuelectenerg-198	380	20	steady	steady	ADJ
fuelectenerg-198	380	21	-	-	PUNCT
fuelectenerg-198	380	22	state	state	NOUN
fuelectenerg-198	380	23	transport	transport	NOUN
fuelectenerg-198	380	24	”	"	PUNCT
fuelectenerg-198	380	25	,	,	PUNCT
fuelectenerg-198	380	26	solid	solid	PROPN
fuelectenerg-198	380	27	-	-	PUNCT
fuelectenerg-198	380	28	st	st	PROPN
fuelectenerg-198	380	29	.	.	PROPN
fuelectenerg-198	380	30	electron	electron	PROPN
fuelectenerg-198	380	31	.	.	PUNCT
fuelectenerg-198	381	1	31	31	NUM
fuelectenerg-198	381	2	,	,	PUNCT
fuelectenerg-198	381	3	1988	1988	NUM
fuelectenerg-198	381	4	,	,	PUNCT
fuelectenerg-198	381	5	pp	pp	ADV
fuelectenerg-198	381	6	.	.	PUNCT
fuelectenerg-198	382	1	629–636	629–636	NUM
fuelectenerg-198	382	2	.	.	PUNCT
fuelectenerg-198	383	1	[	[	X
fuelectenerg-198	383	2	47	47	NUM
fuelectenerg-198	383	3	]	]	PUNCT
fuelectenerg-198	383	4	j.	j.	PROPN
fuelectenerg-198	383	5	r.	r.	PROPN
fuelectenerg-198	383	6	yeargan	yeargan	PROPN
fuelectenerg-198	383	7	and	and	CCONJ
fuelectenerg-198	383	8	h.	h.	PROPN
fuelectenerg-198	383	9	l.	l.	PROPN
fuelectenerg-198	383	10	taylor	taylor	PROPN
fuelectenerg-198	383	11	,	,	PUNCT
fuelectenerg-198	383	12	“	"	PUNCT
fuelectenerg-198	383	13	the	the	DET
fuelectenerg-198	383	14	poole	poole	ADJ
fuelectenerg-198	383	15	-	-	PUNCT
fuelectenerg-198	383	16	frenkel	frenkel	NOUN
fuelectenerg-198	383	17	effect	effect	NOUN
fuelectenerg-198	383	18	with	with	ADP
fuelectenerg-198	383	19	compensation	compensation	NOUN
fuelectenerg-198	383	20	present	present	ADJ
fuelectenerg-198	383	21	”	"	PUNCT
fuelectenerg-198	383	22	,	,	PUNCT
fuelectenerg-198	383	23	j.	j.	PROPN
fuelectenerg-198	383	24	appl	appl	PROPN
fuelectenerg-198	383	25	.	.	PUNCT
fuelectenerg-198	384	1	phys	phy	NOUN
fuelectenerg-198	384	2	.	.	PUNCT
fuelectenerg-198	385	1	39	39	NUM
fuelectenerg-198	385	2	,	,	PUNCT
fuelectenerg-198	385	3	1968	1968	NUM
fuelectenerg-198	385	4	,	,	PUNCT
fuelectenerg-198	385	5	pp	pp	ADV
fuelectenerg-198	385	6	.	.	PUNCT
fuelectenerg-198	386	1	5600–5604	5600–5604	NUM
fuelectenerg-198	386	2	.	.	PUNCT
fuelectenerg-198	387	1	[	[	X
fuelectenerg-198	387	2	48	48	NUM
fuelectenerg-198	387	3	]	]	X
fuelectenerg-198	387	4	n.	n.	NOUN
fuelectenerg-198	387	5	novkovski	novkovski	NOUN
fuelectenerg-198	387	6	,	,	PUNCT
fuelectenerg-198	387	7	“	"	PUNCT
fuelectenerg-198	387	8	limitations	limitation	NOUN
fuelectenerg-198	387	9	in	in	ADP
fuelectenerg-198	387	10	the	the	DET
fuelectenerg-198	387	11	methods	method	NOUN
fuelectenerg-198	387	12	of	of	ADP
fuelectenerg-198	387	13	determination	determination	NOUN
fuelectenerg-198	387	14	of	of	ADP
fuelectenerg-198	387	15	conduction	conduction	NOUN
fuelectenerg-198	387	16	mechanisms	mechanism	NOUN
fuelectenerg-198	387	17	in	in	ADP
fuelectenerg-198	387	18	highpermittivity	highpermittivity	NOUN
fuelectenerg-198	387	19	dielectric	dielectric	NOUN
fuelectenerg-198	387	20	nano	nano	NOUN
fuelectenerg-198	387	21	-	-	PUNCT
fuelectenerg-198	387	22	layers	layer	NOUN
fuelectenerg-198	387	23	”	"	PUNCT
fuelectenerg-198	387	24	,	,	PUNCT
fuelectenerg-198	387	25	physica	physica	NOUN
fuelectenerg-198	387	26	b	b	PROPN
fuelectenerg-198	387	27	:	:	PUNCT
fuelectenerg-198	387	28	condensed	condense	VERB
fuelectenerg-198	387	29	matter	matter	NOUN
fuelectenerg-198	387	30	.	.	PUNCT
fuelectenerg-198	387	31	398	398	NUM
fuelectenerg-198	387	32	,	,	PUNCT
fuelectenerg-198	387	33	2007	2007	NUM
fuelectenerg-198	387	34	,	,	PUNCT
fuelectenerg-198	387	35	pp	pp	ADJ
fuelectenerg-198	387	36	.	.	PUNCT
fuelectenerg-198	388	1	28–32	28–32	NUM
fuelectenerg-198	388	2	.	.	PUNCT
fuelectenerg-198	389	1	physical	physical	ADJ
fuelectenerg-198	389	2	modeling	modeling	NOUN
fuelectenerg-198	389	3	of	of	ADP
fuelectenerg-198	389	4	ta2o5	ta2o5	PROPN
fuelectenerg-198	389	5	based	base	VERB
fuelectenerg-198	389	6	mos	mos	PROPN
fuelectenerg-198	389	7	capacitors	capacitor	NOUN
fuelectenerg-198	389	8	on	on	ADP
fuelectenerg-198	389	9	si	si	PROPN
fuelectenerg-198	389	10	273	273	NUM
fuelectenerg-198	389	11	[	[	SYM
fuelectenerg-198	389	12	49	49	NUM
fuelectenerg-198	389	13	]	]	PUNCT
fuelectenerg-198	389	14	k.	k.	PROPN
fuelectenerg-198	389	15	n.	n.	PROPN
fuelectenerg-198	389	16	yang	yang	PROPN
fuelectenerg-198	389	17	,	,	PUNCT
fuelectenerg-198	389	18	h.	h.	PROPN
fuelectenerg-198	389	19	t.	t.	PROPN
fuelectenerg-198	389	20	huang	huang	PROPN
fuelectenerg-198	389	21	,	,	PUNCT
fuelectenerg-198	389	22	m.	m.	PROPN
fuelectenerg-198	389	23	c.	c.	PROPN
fuelectenerg-198	389	24	chang	chang	PROPN
fuelectenerg-198	389	25	,	,	PUNCT
fuelectenerg-198	389	26	c.	c.	PROPN
fuelectenerg-198	389	27	m.	m.	PROPN
fuelectenerg-198	389	28	chu	chu	PROPN
fuelectenerg-198	389	29	,	,	PUNCT
fuelectenerg-198	389	30	y.	y.	PROPN
fuelectenerg-198	389	31	s.	s.	PROPN
fuelectenerg-198	389	32	chen	chen	PROPN
fuelectenerg-198	389	33	,	,	PUNCT
fuelectenerg-198	389	34	m.	m.	PROPN
fuelectenerg-198	389	35	j.	j.	PROPN
fuelectenerg-198	389	36	chen	chen	PROPN
fuelectenerg-198	389	37	,	,	PUNCT
fuelectenerg-198	389	38	y.	y.	PROPN
fuelectenerg-198	389	39	m.	m.	PROPN
fuelectenerg-198	389	40	lin	lin	PROPN
fuelectenerg-198	389	41	,	,	PUNCT
fuelectenerg-198	389	42	m.	m.	PROPN
fuelectenerg-198	389	43	c.	c.	PROPN
fuelectenerg-198	389	44	yu	yu	PROPN
fuelectenerg-198	389	45	,	,	PUNCT
fuelectenerg-198	389	46	s.	s.	PROPN
fuelectenerg-198	389	47	m.	m.	PROPN
fuelectenerg-198	389	48	yang	yang	PROPN
fuelectenerg-198	389	49	,	,	PUNCT
fuelectenerg-198	389	50	d.	d.	PROPN
fuelectenerg-198	389	51	c.	c.	PROPN
fuelectenerg-198	389	52	h.	h.	PROPN
fuelectenerg-198	389	53	yu	yu	PROPN
fuelectenerg-198	389	54	and	and	CCONJ
fuelectenerg-198	389	55	m.	m.	PROPN
fuelectenerg-198	389	56	s.	s.	PROPN
fuelectenerg-198	389	57	liang	liang	PROPN
fuelectenerg-198	389	58	,	,	PUNCT
fuelectenerg-198	389	59	“	"	PUNCT
fuelectenerg-198	389	60	a	a	DET
fuelectenerg-198	389	61	physical	physical	ADJ
fuelectenerg-198	389	62	model	model	NOUN
fuelectenerg-198	389	63	for	for	ADP
fuelectenerg-198	389	64	hole	hole	NOUN
fuelectenerg-198	389	65	direct	direct	ADJ
fuelectenerg-198	389	66	tunneling	tunneling	NOUN
fuelectenerg-198	389	67	current	current	NOUN
fuelectenerg-198	389	68	in	in	ADP
fuelectenerg-198	389	69	p+	p+	NOUN
fuelectenerg-198	389	70	poly	poly	ADJ
fuelectenerg-198	389	71	-	-	PUNCT
fuelectenerg-198	389	72	gate	gate	NOUN
fuelectenerg-198	389	73	pmosfets	pmosfet	NOUN
fuelectenerg-198	389	74	with	with	ADP
fuelectenerg-198	389	75	ultrathin	ultrathin	ADJ
fuelectenerg-198	389	76	gate	gate	NOUN
fuelectenerg-198	389	77	oxides	oxide	NOUN
fuelectenerg-198	389	78	”	"	PUNCT
fuelectenerg-198	389	79	,	,	PUNCT
fuelectenerg-198	389	80	ieee	ieee	PROPN
fuelectenerg-198	389	81	trans	trans	PROPN
fuelectenerg-198	389	82	.	.	PROPN
fuelectenerg-198	390	1	electron	electron	PROPN
fuelectenerg-198	390	2	dev	dev	PROPN
fuelectenerg-198	390	3	.	.	PROPN
fuelectenerg-198	391	1	47	47	NUM
fuelectenerg-198	391	2	,	,	PUNCT
fuelectenerg-198	391	3	2000	2000	NUM
fuelectenerg-198	391	4	,	,	PUNCT
fuelectenerg-198	391	5	pp	pp	ADJ
fuelectenerg-198	391	6	.	.	PUNCT
fuelectenerg-198	392	1	2161	2161	NUM
fuelectenerg-198	392	2	-	-	SYM
fuelectenerg-198	392	3	2166	2166	NUM
fuelectenerg-198	392	4	.	.	PUNCT
fuelectenerg-198	393	1	[	[	X
fuelectenerg-198	393	2	50	50	NUM
fuelectenerg-198	393	3	]	]	PUNCT
fuelectenerg-198	393	4	n.	n.	PROPN
fuelectenerg-198	393	5	yang	yang	PROPN
fuelectenerg-198	393	6	,	,	PUNCT
fuelectenerg-198	393	7	w.k	w.k	PROPN
fuelectenerg-198	393	8	.	.	PROPN
fuelectenerg-198	393	9	henson	henson	PROPN
fuelectenerg-198	393	10	,	,	PUNCT
fuelectenerg-198	393	11	j.r	j.r	PROPN
fuelectenerg-198	393	12	.	.	PROPN
fuelectenerg-198	393	13	hauser	hauser	PROPN
fuelectenerg-198	393	14	and	and	CCONJ
fuelectenerg-198	393	15	j.	j.	PROPN
fuelectenerg-198	393	16	wortman	wortman	PROPN
fuelectenerg-198	393	17	,	,	PUNCT
fuelectenerg-198	393	18	“	"	PUNCT
fuelectenerg-198	393	19	modeling	model	VERB
fuelectenerg-198	393	20	study	study	NOUN
fuelectenerg-198	393	21	of	of	ADP
fuelectenerg-198	393	22	ultrathin	ultrathin	PROPN
fuelectenerg-198	393	23	gate	gate	NOUN
fuelectenerg-198	393	24	oxides	oxide	NOUN
fuelectenerg-198	393	25	using	use	VERB
fuelectenerg-198	393	26	direct	direct	ADJ
fuelectenerg-198	393	27	tunneling	tunneling	NOUN
fuelectenerg-198	393	28	current	current	ADJ
fuelectenerg-198	393	29	and	and	CCONJ
fuelectenerg-198	393	30	capacitance	capacitance	NOUN
fuelectenerg-198	393	31	-	-	PUNCT
fuelectenerg-198	393	32	voltage	voltage	NOUN
fuelectenerg-198	393	33	measurements	measurement	NOUN
fuelectenerg-198	393	34	in	in	ADP
fuelectenerg-198	393	35	mos	mos	PROPN
fuelectenerg-198	393	36	devices	device	NOUN
fuelectenerg-198	393	37	”	"	PUNCT
fuelectenerg-198	393	38	,	,	PUNCT
fuelectenerg-198	393	39	ieee	ieee	PROPN
fuelectenerg-198	393	40	trans	trans	PROPN
fuelectenerg-198	393	41	.	.	PROPN
fuelectenerg-198	393	42	electron	electron	PROPN
fuelectenerg-198	393	43	dev	dev	PROPN
fuelectenerg-198	393	44	.	.	PROPN
fuelectenerg-198	393	45	46	46	NUM
fuelectenerg-198	393	46	,	,	PUNCT
fuelectenerg-198	393	47	1999	1999	NUM
fuelectenerg-198	393	48	,	,	PUNCT
fuelectenerg-198	393	49	pp	pp	ADP
fuelectenerg-198	393	50	.	.	PUNCT
fuelectenerg-198	393	51	1464	1464	NUM
fuelectenerg-198	393	52	-	-	SYM
fuelectenerg-198	393	53	1471	1471	NUM
fuelectenerg-198	393	54	.	.	PUNCT
fuelectenerg-198	394	1	[	[	X
fuelectenerg-198	394	2	51	51	NUM
fuelectenerg-198	394	3	]	]	X
fuelectenerg-198	394	4	d.	d.	PROPN
fuelectenerg-198	394	5	k.	k.	PROPN
fuelectenerg-198	394	6	shroder	shroder	PROPN
fuelectenerg-198	394	7	,	,	PUNCT
fuelectenerg-198	394	8	semiconductor	semiconductor	NOUN
fuelectenerg-198	394	9	material	material	NOUN
fuelectenerg-198	394	10	and	and	CCONJ
fuelectenerg-198	394	11	device	device	NOUN
fuelectenerg-198	394	12	characterization	characterization	NOUN
fuelectenerg-198	394	13	.	.	PUNCT
fuelectenerg-198	395	1	hobokeen	hobokeen	PROPN
fuelectenerg-198	395	2	,	,	PUNCT
fuelectenerg-198	395	3	new	new	PROPN
fuelectenerg-198	395	4	jersey	jersey	PROPN
fuelectenerg-198	395	5	:	:	PUNCT
fuelectenerg-198	395	6	john	john	PROPN
fuelectenerg-198	395	7	wiley	wiley	PROPN
fuelectenerg-198	395	8	&	&	CCONJ
fuelectenerg-198	395	9	sons	son	NOUN
fuelectenerg-198	395	10	,	,	PUNCT
fuelectenerg-198	395	11	2006	2006	NUM
fuelectenerg-198	395	12	,	,	PUNCT
fuelectenerg-198	395	13	chapter	chapter	NOUN
fuelectenerg-198	395	14	9	9	NUM
fuelectenerg-198	395	15	,	,	PUNCT
fuelectenerg-198	395	16	pp	pp	ADJ
fuelectenerg-198	395	17	.	.	PUNCT
fuelectenerg-198	396	1	347–350	347–350	NUM
fuelectenerg-198	396	2	.	.	PUNCT
fuelectenerg-198	397	1	[	[	X
fuelectenerg-198	397	2	52	52	NUM
fuelectenerg-198	397	3	]	]	X
fuelectenerg-198	397	4	n.	n.	NOUN
fuelectenerg-198	397	5	novkovski	novkovski	PROPN
fuelectenerg-198	397	6	,	,	PUNCT
fuelectenerg-198	397	7	a.	a.	PROPN
fuelectenerg-198	397	8	paskaleva	paskaleva	PROPN
fuelectenerg-198	397	9	and	and	CCONJ
fuelectenerg-198	397	10	e.	e.	PROPN
fuelectenerg-198	397	11	atanassova	atanassova	PROPN
fuelectenerg-198	397	12	,	,	PUNCT
fuelectenerg-198	397	13	“	"	PUNCT
fuelectenerg-198	397	14	dielectric	dielectric	ADJ
fuelectenerg-198	397	15	properties	property	NOUN
fuelectenerg-198	397	16	of	of	ADP
fuelectenerg-198	397	17	rf	rf	NOUN
fuelectenerg-198	397	18	sputtered	sputtered	ADJ
fuelectenerg-198	397	19	ta2o5	ta2o5	PROPN
fuelectenerg-198	397	20	on	on	ADP
fuelectenerg-198	397	21	rapid	rapid	ADJ
fuelectenerg-198	397	22	theramlly	theramlly	ADV
fuelectenerg-198	397	23	nitrided	nitride	VERB
fuelectenerg-198	397	24	si	si	NOUN
fuelectenerg-198	397	25	”	"	PUNCT
fuelectenerg-198	397	26	,	,	PUNCT
fuelectenerg-198	397	27	semicond	semicond	PROPN
fuelectenerg-198	397	28	.	.	PUNCT
fuelectenerg-198	398	1	sci	sci	PROPN
fuelectenerg-198	398	2	.	.	PROPN
fuelectenerg-198	398	3	technol	technol	PROPN
fuelectenerg-198	398	4	.	.	PROPN
fuelectenerg-198	398	5	20	20	NUM
fuelectenerg-198	398	6	,	,	PUNCT
fuelectenerg-198	398	7	2005	2005	NUM
fuelectenerg-198	398	8	,	,	PUNCT
fuelectenerg-198	398	9	pp	pp	ADV
fuelectenerg-198	398	10	.	.	PUNCT
fuelectenerg-198	399	1	233–238	233–238	NUM
fuelectenerg-198	399	2	.	.	PUNCT
fuelectenerg-198	400	1	[	[	X
fuelectenerg-198	400	2	53	53	NUM
fuelectenerg-198	400	3	]	]	X
fuelectenerg-198	400	4	n.	n.	NOUN
fuelectenerg-198	400	5	novkovski	novkovski	NOUN
fuelectenerg-198	400	6	,	,	PUNCT
fuelectenerg-198	400	7	“	"	PUNCT
fuelectenerg-198	400	8	conduction	conduction	NOUN
fuelectenerg-198	400	9	and	and	CCONJ
fuelectenerg-198	400	10	charge	charge	NOUN
fuelectenerg-198	400	11	analysis	analysis	NOUN
fuelectenerg-198	400	12	of	of	ADP
fuelectenerg-198	400	13	metal	metal	NOUN
fuelectenerg-198	400	14	(	(	PUNCT
fuelectenerg-198	400	15	al	al	PROPN
fuelectenerg-198	400	16	,	,	PUNCT
fuelectenerg-198	400	17	w	w	PROPN
fuelectenerg-198	400	18	and	and	CCONJ
fuelectenerg-198	400	19	au)-ta2o5	au)-ta2o5	ADP
fuelectenerg-198	400	20	/	/	SYM
fuelectenerg-198	400	21	sio2	sio2	PROPN
fuelectenerg-198	400	22	-	-	PUNCT
fuelectenerg-198	400	23	si	si	ADJ
fuelectenerg-198	400	24	structures	structure	NOUN
fuelectenerg-198	400	25	”	"	PUNCT
fuelectenerg-198	400	26	,	,	PUNCT
fuelectenerg-198	400	27	semicond	semicond	PROPN
fuelectenerg-198	400	28	.	.	PUNCT
fuelectenerg-198	401	1	sci	sci	PROPN
fuelectenerg-198	401	2	.	.	PROPN
fuelectenerg-198	401	3	technol	technol	PROPN
fuelectenerg-198	401	4	.	.	PROPN
fuelectenerg-198	401	5	21	21	NUM
fuelectenerg-198	401	6	,	,	PUNCT
fuelectenerg-198	401	7	2006	2006	NUM
fuelectenerg-198	401	8	,	,	PUNCT
fuelectenerg-198	401	9	pp	pp	ADV
fuelectenerg-198	401	10	.	.	PUNCT
fuelectenerg-198	402	1	945–951	945–951	NUM
fuelectenerg-198	402	2	.	.	PUNCT
fuelectenerg-198	403	1	[	[	X
fuelectenerg-198	403	2	54	54	NUM
fuelectenerg-198	403	3	]	]	PUNCT
fuelectenerg-198	403	4	aleksandar	aleksandar	PROPN
fuelectenerg-198	403	5	skeparovski	skeparovski	PROPN
fuelectenerg-198	403	6	and	and	CCONJ
fuelectenerg-198	403	7	nenad	nenad	PROPN
fuelectenerg-198	403	8	novkovski	novkovski	PROPN
fuelectenerg-198	403	9	,	,	PUNCT
fuelectenerg-198	403	10	“	"	PUNCT
fuelectenerg-198	403	11	on	on	ADP
fuelectenerg-198	403	12	the	the	DET
fuelectenerg-198	403	13	nature	nature	NOUN
fuelectenerg-198	403	14	of	of	ADP
fuelectenerg-198	403	15	the	the	DET
fuelectenerg-198	403	16	high	high	ADJ
fuelectenerg-198	403	17	-	-	PUNCT
fuelectenerg-198	403	18	k	k	NOUN
fuelectenerg-198	403	19	dielectrics	dielectric	NOUN
fuelectenerg-198	403	20	leakage	leakage	NOUN
fuelectenerg-198	403	21	current	current	ADJ
fuelectenerg-198	403	22	reduction	reduction	NOUN
fuelectenerg-198	403	23	by	by	ADP
fuelectenerg-198	403	24	postdeposition	postdeposition	NOUN
fuelectenerg-198	403	25	annealing	annealing	NOUN
fuelectenerg-198	403	26	”	"	PUNCT
fuelectenerg-198	403	27	,	,	PUNCT
fuelectenerg-198	403	28	j.	j.	PROPN
fuelectenerg-198	403	29	optoelectron	optoelectron	PROPN
fuelectenerg-198	403	30	.	.	PUNCT
fuelectenerg-198	404	1	adv	adv	PROPN
fuelectenerg-198	404	2	.	.	PUNCT
fuelectenerg-198	404	3	mat	mat	PROPN
fuelectenerg-198	404	4	.	.	NOUN
fuelectenerg-198	404	5	9	9	NUM
fuelectenerg-198	404	6	,	,	PUNCT
fuelectenerg-198	404	7	2007	2007	NUM
fuelectenerg-198	404	8	,	,	PUNCT
fuelectenerg-198	404	9	pp	pp	ADJ
fuelectenerg-198	404	10	.	.	PUNCT
fuelectenerg-198	405	1	897–901	897–901	NUM
fuelectenerg-198	405	2	.	.	PUNCT
fuelectenerg-198	406	1	[	[	X
fuelectenerg-198	406	2	55	55	NUM
fuelectenerg-198	406	3	]	]	PUNCT
fuelectenerg-198	406	4	w.	w.	PROPN
fuelectenerg-198	406	5	j.	j.	PROPN
fuelectenerg-198	406	6	zhu	zhu	PROPN
fuelectenerg-198	406	7	,	,	PUNCT
fuelectenerg-198	406	8	t.-p	t.-p	PROPN
fuelectenerg-198	406	9	.	.	PUNCT
fuelectenerg-198	407	1	ma	ma	PROPN
fuelectenerg-198	407	2	,	,	PUNCT
fuelectenerg-198	407	3	t.	t.	PROPN
fuelectenerg-198	407	4	tamagawa	tamagawa	PROPN
fuelectenerg-198	407	5	,	,	PUNCT
fuelectenerg-198	407	6	j.	j.	PROPN
fuelectenerg-198	407	7	kim	kim	PROPN
fuelectenerg-198	407	8	and	and	CCONJ
fuelectenerg-198	407	9	y.	y.	PROPN
fuelectenerg-198	407	10	di	di	PROPN
fuelectenerg-198	407	11	,	,	PUNCT
fuelectenerg-198	407	12	“	"	PUNCT
fuelectenerg-198	407	13	current	current	ADJ
fuelectenerg-198	407	14	transport	transport	NOUN
fuelectenerg-198	407	15	in	in	ADP
fuelectenerg-198	407	16	metal	metal	NOUN
fuelectenerg-198	407	17	/	/	SYM
fuelectenerg-198	407	18	hafnium	hafnium	NOUN
fuelectenerg-198	407	19	oxide	oxide	NOUN
fuelectenerg-198	407	20	/	/	SYM
fuelectenerg-198	407	21	silicon	silicon	NOUN
fuelectenerg-198	407	22	structure	structure	NOUN
fuelectenerg-198	407	23	”	"	PUNCT
fuelectenerg-198	407	24	ieee	ieee	NOUN
fuelectenerg-198	407	25	electron	electron	NOUN
fuelectenerg-198	407	26	device	device	NOUN
fuelectenerg-198	407	27	lett	lett	PROPN
fuelectenerg-198	407	28	.	.	PROPN
fuelectenerg-198	408	1	23	23	NUM
fuelectenerg-198	408	2	,	,	PUNCT
fuelectenerg-198	408	3	2002	2002	NUM
fuelectenerg-198	408	4	,	,	PUNCT
fuelectenerg-198	408	5	pp	pp	ADJ
fuelectenerg-198	408	6	.	.	PUNCT
fuelectenerg-198	409	1	97–99	97–99	X
fuelectenerg-198	409	2	.	.	PUNCT
fuelectenerg-198	410	1	[	[	X
fuelectenerg-198	410	2	56	56	NUM
fuelectenerg-198	410	3	]	]	X
fuelectenerg-198	410	4	s.	s.	PROPN
fuelectenerg-198	410	5	huang	huang	PROPN
fuelectenerg-198	410	6	,	,	PUNCT
fuelectenerg-198	410	7	“	"	PUNCT
fuelectenerg-198	410	8	oxygen	oxygen	NOUN
fuelectenerg-198	410	9	annealing	anneal	VERB
fuelectenerg-198	410	10	effects	effect	NOUN
fuelectenerg-198	410	11	on	on	ADP
fuelectenerg-198	410	12	transport	transport	NOUN
fuelectenerg-198	410	13	and	and	CCONJ
fuelectenerg-198	410	14	charging	charge	VERB
fuelectenerg-198	410	15	characteristics	characteristic	NOUN
fuelectenerg-198	410	16	of	of	ADP
fuelectenerg-198	410	17	al	al	PROPN
fuelectenerg-198	410	18	-	-	PUNCT
fuelectenerg-198	410	19	ta2o5	ta2o5	PROPN
fuelectenerg-198	410	20	/	/	SYM
fuelectenerg-198	410	21	sioxny	sioxny	PROPN
fuelectenerg-198	410	22	-	-	PUNCT
fuelectenerg-198	410	23	si	si	NOUN
fuelectenerg-198	410	24	structure	structure	NOUN
fuelectenerg-198	410	25	”	"	PUNCT
fuelectenerg-198	410	26	,	,	PUNCT
fuelectenerg-198	410	27	ieee	ieee	PROPN
fuelectenerg-198	410	28	trans	trans	PROPN
fuelectenerg-198	410	29	.	.	PROPN
fuelectenerg-198	410	30	electron	electron	PROPN
fuelectenerg-198	410	31	.	.	PUNCT
fuelectenerg-198	411	1	dev	dev	PROPN
fuelectenerg-198	411	2	.	.	PROPN
fuelectenerg-198	411	3	60	60	NUM
fuelectenerg-198	411	4	,	,	PUNCT
fuelectenerg-198	411	5	2013	2013	NUM
fuelectenerg-198	411	6	,	,	PUNCT
fuelectenerg-198	411	7	pp	pp	ADJ
fuelectenerg-198	411	8	.	.	PUNCT
fuelectenerg-198	412	1	2741–2746	2741–2746	NUM
fuelectenerg-198	412	2	.	.	PUNCT
fuelectenerg-198	413	1	[	[	X
fuelectenerg-198	413	2	57	57	NUM
fuelectenerg-198	413	3	]	]	X
fuelectenerg-198	413	4	n.	n.	NOUN
fuelectenerg-198	413	5	novkovski	novkovski	PROPN
fuelectenerg-198	413	6	,	,	PUNCT
fuelectenerg-198	413	7	and	and	CCONJ
fuelectenerg-198	413	8	e.	e.	PROPN
fuelectenerg-198	413	9	atanassova	atanassova	PROPN
fuelectenerg-198	413	10	,	,	PUNCT
fuelectenerg-198	413	11	“	"	PUNCT
fuelectenerg-198	413	12	frequency	frequency	ADJ
fuelectenerg-198	413	13	dependence	dependence	NOUN
fuelectenerg-198	413	14	of	of	ADP
fuelectenerg-198	413	15	the	the	DET
fuelectenerg-198	413	16	effective	effective	ADJ
fuelectenerg-198	413	17	series	series	NOUN
fuelectenerg-198	413	18	capacitance	capacitance	NOUN
fuelectenerg-198	413	19	of	of	ADP
fuelectenerg-198	413	20	metalta2o5	metalta2o5	PRON
fuelectenerg-198	413	21	/	/	SYM
fuelectenerg-198	413	22	sio2	sio2	PROPN
fuelectenerg-198	413	23	-	-	PUNCT
fuelectenerg-198	413	24	si	si	ADJ
fuelectenerg-198	413	25	structures	structure	NOUN
fuelectenerg-198	413	26	”	"	PUNCT
fuelectenerg-198	413	27	,	,	PUNCT
fuelectenerg-198	413	28	semicond	semicond	PROPN
fuelectenerg-198	413	29	.	.	PUNCT
fuelectenerg-198	414	1	sci	sci	PROPN
fuelectenerg-198	414	2	.	.	PROPN
fuelectenerg-198	414	3	technol	technol	PROPN
fuelectenerg-198	414	4	.	.	PROPN
fuelectenerg-198	415	1	22	22	NUM
fuelectenerg-198	415	2	,	,	PUNCT
fuelectenerg-198	415	3	2007	2007	NUM
fuelectenerg-198	415	4	,	,	PUNCT
fuelectenerg-198	415	5	pp	pp	ADJ
fuelectenerg-198	415	6	.	.	PUNCT
fuelectenerg-198	416	1	533–536	533–536	NUM
fuelectenerg-198	416	2	.	.	PUNCT
fuelectenerg-198	417	1	[	[	X
fuelectenerg-198	417	2	58	58	NUM
fuelectenerg-198	417	3	]	]	X
fuelectenerg-198	417	4	n.	n.	PROPN
fuelectenerg-198	417	5	novkovski	novkovski	PROPN
fuelectenerg-198	417	6	and	and	CCONJ
fuelectenerg-198	417	7	e.	e.	PROPN
fuelectenerg-198	417	8	atanassova	atanassova	PROPN
fuelectenerg-198	417	9	,	,	PUNCT
fuelectenerg-198	417	10	“	"	PUNCT
fuelectenerg-198	417	11	peculiarities	peculiarity	NOUN
fuelectenerg-198	417	12	of	of	ADP
fuelectenerg-198	417	13	capacitance	capacitance	NOUN
fuelectenerg-198	417	14	measurements	measurement	NOUN
fuelectenerg-198	417	15	of	of	ADP
fuelectenerg-198	417	16	nanosized	nanosized	ADJ
fuelectenerg-198	417	17	high	high	ADJ
fuelectenerg-198	417	18	-	-	PUNCT
fuelectenerg-198	417	19	k	k	NOUN
fuelectenerg-198	417	20	dielectrics	dielectric	NOUN
fuelectenerg-198	417	21	:	:	PUNCT
fuelectenerg-198	417	22	case	case	NOUN
fuelectenerg-198	417	23	of	of	ADP
fuelectenerg-198	417	24	ta2o5	ta2o5	PROPN
fuelectenerg-198	417	25	”	"	PUNCT
fuelectenerg-198	417	26	,	,	PUNCT
fuelectenerg-198	417	27	j.	j.	PROPN
fuelectenerg-198	417	28	optoelectron	optoelectron	PROPN
fuelectenerg-198	417	29	.	.	PUNCT
fuelectenerg-198	418	1	adv	adv	PROPN
fuelectenerg-198	418	2	.	.	PUNCT
fuelectenerg-198	419	1	mat.-symposia	mat.-symposia	PROPN
fuelectenerg-198	419	2	1	1	NUM
fuelectenerg-198	419	3	,	,	PUNCT
fuelectenerg-198	419	4	2009	2009	NUM
fuelectenerg-198	419	5	,	,	PUNCT
fuelectenerg-198	419	6	pp	pp	ADV
fuelectenerg-198	419	7	.	.	PUNCT
fuelectenerg-198	420	1	398–403	398–403	NUM
fuelectenerg-198	420	2	.	.	PUNCT
fuelectenerg-198	421	1	[	[	X
fuelectenerg-198	421	2	59	59	NUM
fuelectenerg-198	421	3	]	]	X
fuelectenerg-198	421	4	n.	n.	NOUN
fuelectenerg-198	421	5	novkovski	novkovski	PROPN
fuelectenerg-198	421	6	and	and	CCONJ
fuelectenerg-198	421	7	e.	e.	PROPN
fuelectenerg-198	421	8	atanassova	atanassova	PROPN
fuelectenerg-198	421	9	,	,	PUNCT
fuelectenerg-198	421	10	“	"	PUNCT
fuelectenerg-198	421	11	origin	origin	NOUN
fuelectenerg-198	421	12	of	of	ADP
fuelectenerg-198	421	13	the	the	DET
fuelectenerg-198	421	14	stress	stress	NOUN
fuelectenerg-198	421	15	-	-	PUNCT
fuelectenerg-198	421	16	induced	induce	VERB
fuelectenerg-198	421	17	leakage	leakage	NOUN
fuelectenerg-198	421	18	currents	current	NOUN
fuelectenerg-198	421	19	in	in	ADP
fuelectenerg-198	421	20	al	al	PROPN
fuelectenerg-198	421	21	-	-	PUNCT
fuelectenerg-198	421	22	ta2o5	ta2o5	PROPN
fuelectenerg-198	421	23	/	/	SYM
fuelectenerg-198	421	24	sio2	sio2	PROPN
fuelectenerg-198	421	25	-	-	PUNCT
fuelectenerg-198	421	26	si	si	ADJ
fuelectenerg-198	421	27	structures	structure	NOUN
fuelectenerg-198	421	28	”	"	PUNCT
fuelectenerg-198	421	29	,	,	PUNCT
fuelectenerg-198	421	30	appl	appl	NOUN
fuelectenerg-198	421	31	.	.	PUNCT
fuelectenerg-198	422	1	phys	phy	NOUN
fuelectenerg-198	422	2	.	.	PUNCT
fuelectenerg-198	423	1	lett	lett	PROPN
fuelectenerg-198	423	2	.	.	PROPN
fuelectenerg-198	424	1	86	86	NUM
fuelectenerg-198	424	2	,	,	PUNCT
fuelectenerg-198	424	3	2005	2005	NUM
fuelectenerg-198	424	4	,	,	PUNCT
fuelectenerg-198	424	5	pp	pp	ADJ
fuelectenerg-198	424	6	.	.	PUNCT
fuelectenerg-198	425	1	1521041–52104	1521041–52104	NUM
fuelectenerg-198	425	2	-	-	PUNCT
fuelectenerg-198	425	3	3	3	NUM
fuelectenerg-198	425	4	.	.	PUNCT
fuelectenerg-198	426	1	[	[	X
fuelectenerg-198	426	2	60	60	NUM
fuelectenerg-198	426	3	]	]	X
fuelectenerg-198	426	4	n.	n.	PROPN
fuelectenerg-198	426	5	novkovski	novkovski	PROPN
fuelectenerg-198	426	6	,	,	PUNCT
fuelectenerg-198	426	7	e.	e.	PROPN
fuelectenerg-198	426	8	atanassova	atanassova	PROPN
fuelectenerg-198	426	9	and	and	CCONJ
fuelectenerg-198	426	10	a.	a.	PROPN
fuelectenerg-198	426	11	paskaleva	paskaleva	PROPN
fuelectenerg-198	426	12	,	,	PUNCT
fuelectenerg-198	426	13	“	"	PUNCT
fuelectenerg-198	426	14	stress	stress	NOUN
fuelectenerg-198	426	15	-	-	PUNCT
fuelectenerg-198	426	16	induced	induce	VERB
fuelectenerg-198	426	17	leakage	leakage	NOUN
fuelectenerg-198	426	18	currents	current	NOUN
fuelectenerg-198	426	19	of	of	ADP
fuelectenerg-198	426	20	the	the	DET
fuelectenerg-198	426	21	rf	rf	NOUN
fuelectenerg-198	426	22	sputtered	sputter	VERB
fuelectenerg-198	426	23	ta2o5	ta2o5	NOUN
fuelectenerg-198	426	24	on	on	ADP
fuelectenerg-198	426	25	n	n	ADV
fuelectenerg-198	426	26	-	-	PUNCT
fuelectenerg-198	426	27	implanted	implant	VERB
fuelectenerg-198	426	28	silicon	silicon	NOUN
fuelectenerg-198	426	29	”	"	PUNCT
fuelectenerg-198	426	30	,	,	PUNCT
fuelectenerg-198	426	31	appl	appl	PROPN
fuelectenerg-198	426	32	.	.	PUNCT
fuelectenerg-198	427	1	surf	surf	PROPN
fuelectenerg-198	427	2	.	.	PUNCT
fuelectenerg-198	428	1	sci	sci	PROPN
fuelectenerg-198	428	2	.	.	PROPN
fuelectenerg-198	428	3	253	253	NUM
fuelectenerg-198	428	4	,	,	PUNCT
fuelectenerg-198	428	5	2007	2007	NUM
fuelectenerg-198	428	6	,	,	PUNCT
fuelectenerg-198	428	7	pp	pp	ADJ
fuelectenerg-198	428	8	.	.	PUNCT
fuelectenerg-198	429	1	4396–4403	4396–4403	X
fuelectenerg-198	429	2	.	.	PUNCT
fuelectenerg-198	430	1	[	[	X
fuelectenerg-198	430	2	61	61	NUM
fuelectenerg-198	430	3	]	]	X
fuelectenerg-198	430	4	n.	n.	NOUN
fuelectenerg-198	430	5	novkovski	novkovski	PROPN
fuelectenerg-198	430	6	,	,	PUNCT
fuelectenerg-198	430	7	e.	e.	PROPN
fuelectenerg-198	430	8	atanassova	atanassova	PROPN
fuelectenerg-198	430	9	and	and	CCONJ
fuelectenerg-198	430	10	a.	a.	PROPN
fuelectenerg-198	430	11	paskaleva	paskaleva	PROPN
fuelectenerg-198	430	12	,	,	PUNCT
fuelectenerg-198	430	13	“	"	PUNCT
fuelectenerg-198	430	14	model	model	NOUN
fuelectenerg-198	430	15	based	base	VERB
fuelectenerg-198	430	16	analysis	analysis	NOUN
fuelectenerg-198	430	17	of	of	ADP
fuelectenerg-198	430	18	electrical	electrical	ADJ
fuelectenerg-198	430	19	and	and	CCONJ
fuelectenerg-198	430	20	wear	wear	VERB
fuelectenerg-198	430	21	-	-	PUNCT
fuelectenerg-198	430	22	out	out	ADP
fuelectenerg-198	430	23	characteristics	characteristic	NOUN
fuelectenerg-198	430	24	of	of	ADP
fuelectenerg-198	430	25	ultra	ultra	ADJ
fuelectenerg-198	430	26	-	-	ADJ
fuelectenerg-198	430	27	thin	thin	ADJ
fuelectenerg-198	430	28	ta2o5	ta2o5	PROPN
fuelectenerg-198	430	29	/	/	SYM
fuelectenerg-198	430	30	sioxny	sioxny	NOUN
fuelectenerg-198	430	31	stacks	stack	VERB
fuelectenerg-198	430	32	on	on	ADP
fuelectenerg-198	430	33	si	si	NOUN
fuelectenerg-198	430	34	”	"	PUNCT
fuelectenerg-198	430	35	,	,	PUNCT
fuelectenerg-198	430	36	proc	proc	NOUN
fuelectenerg-198	430	37	.	.	PUNCT
fuelectenerg-198	431	1	26nd	26nd	ADJ
fuelectenerg-198	431	2	international	international	ADJ
fuelectenerg-198	431	3	conference	conference	NOUN
fuelectenerg-198	431	4	on	on	ADP
fuelectenerg-198	431	5	microelectronics	microelectronic	NOUN
fuelectenerg-198	431	6	,	,	PUNCT
fuelectenerg-198	431	7	10	10	NUM
fuelectenerg-198	431	8	-	-	SYM
fuelectenerg-198	431	9	14	14	NUM
fuelectenerg-198	431	10	may	may	NOUN
fuelectenerg-198	431	11	,	,	PUNCT
fuelectenerg-198	431	12	2008	2008	NUM
fuelectenerg-198	431	13	,	,	PUNCT
fuelectenerg-198	431	14	vol	vol	NOUN
fuelectenerg-198	431	15	.	.	PROPN
fuelectenerg-198	431	16	2	2	NUM
fuelectenerg-198	431	17	,	,	PUNCT
fuelectenerg-198	431	18	pp	pp	ADJ
fuelectenerg-198	431	19	.	.	PUNCT
fuelectenerg-198	432	1	533–536	533–536	NUM
fuelectenerg-198	432	2	.	.	PUNCT
fuelectenerg-198	433	1	[	[	X
fuelectenerg-198	433	2	62	62	NUM
fuelectenerg-198	433	3	]	]	X
fuelectenerg-198	433	4	n.	n.	NOUN
fuelectenerg-198	433	5	novkovski	novkovski	PROPN
fuelectenerg-198	433	6	and	and	CCONJ
fuelectenerg-198	433	7	e.	e.	PROPN
fuelectenerg-198	433	8	atanassova	atanassova	PROPN
fuelectenerg-198	433	9	,	,	PUNCT
fuelectenerg-198	433	10	“	"	PUNCT
fuelectenerg-198	433	11	dielectric	dielectric	ADJ
fuelectenerg-198	433	12	properties	property	NOUN
fuelectenerg-198	433	13	of	of	ADP
fuelectenerg-198	433	14	ta2o5	ta2o5	PROPN
fuelectenerg-198	433	15	films	film	NOUN
fuelectenerg-198	433	16	grown	grow	VERB
fuelectenerg-198	433	17	on	on	ADP
fuelectenerg-198	433	18	silicon	silicon	NOUN
fuelectenerg-198	433	19	substrates	substrate	NOUN
fuelectenerg-198	433	20	plasma	plasma	NOUN
fuelectenerg-198	433	21	nitrided	nitride	VERB
fuelectenerg-198	433	22	in	in	ADP
fuelectenerg-198	433	23	n2o	n2o	NOUN
fuelectenerg-198	433	24	”	"	PUNCT
fuelectenerg-198	433	25	,	,	PUNCT
fuelectenerg-198	433	26	appl	appl	NOUN
fuelectenerg-198	433	27	.	.	PUNCT
fuelectenerg-198	434	1	phys	phy	NOUN
fuelectenerg-198	434	2	.	.	PUNCT
fuelectenerg-198	435	1	a	a	DET
fuelectenerg-198	435	2	81	81	NUM
fuelectenerg-198	435	3	,	,	PUNCT
fuelectenerg-198	435	4	2005	2005	NUM
fuelectenerg-198	435	5	,	,	PUNCT
fuelectenerg-198	435	6	pp	pp	ADJ
fuelectenerg-198	435	7	.	.	PUNCT
fuelectenerg-198	436	1	1191–1195	1191–1195	NUM
fuelectenerg-198	436	2	.	.	PUNCT