id	sid	tid	token	lemma	pos
fuelectenerg-384	1	1	instruction	instruction	NOUN
fuelectenerg-384	1	2	facta	facta	PROPN
fuelectenerg-384	1	3	universitatis	universitatis	PROPN
fuelectenerg-384	1	4	series	series	NOUN
fuelectenerg-384	1	5	:	:	PUNCT
fuelectenerg-384	1	6	electronics	electronic	NOUN
fuelectenerg-384	1	7	and	and	CCONJ
fuelectenerg-384	1	8	energetics	energetics	NOUN
fuelectenerg-384	1	9	vol	vol	NOUN
fuelectenerg-384	1	10	.	.	PUNCT
fuelectenerg-384	1	11	28	28	NUM
fuelectenerg-384	1	12	,	,	PUNCT
fuelectenerg-384	1	13	no	no	DET
fuelectenerg-384	1	14	1	1	NUM
fuelectenerg-384	1	15	,	,	PUNCT
fuelectenerg-384	1	16	march	march	PROPN
fuelectenerg-384	1	17	2015	2015	NUM
fuelectenerg-384	1	18	,	,	PUNCT
fuelectenerg-384	1	19	pp	pp	ADJ
fuelectenerg-384	1	20	.	.	PUNCT
fuelectenerg-384	2	1	113	113	NUM
fuelectenerg-384	2	2	122	122	NUM
fuelectenerg-384	2	3	doi	doi	NOUN
fuelectenerg-384	2	4	:	:	PUNCT
fuelectenerg-384	2	5	10.2298	10.2298	NUM
fuelectenerg-384	2	6	/	/	SYM
fuelectenerg-384	2	7	fuee1501113	fuee1501113	PROPN
fuelectenerg-384	2	8	m	m	PROPN
fuelectenerg-384	2	9	a	a	DET
fuelectenerg-384	2	10	mim	mim	PROPN
fuelectenerg-384	2	11	capacitor	capacitor	NOUN
fuelectenerg-384	2	12	study	study	NOUN
fuelectenerg-384	2	13	of	of	ADP
fuelectenerg-384	2	14	dielectric	dielectric	ADJ
fuelectenerg-384	2	15	charging	charging	NOUN
fuelectenerg-384	2	16	for	for	ADP
fuelectenerg-384	2	17	rf	rf	VERB
fuelectenerg-384	2	18	mems	mem	NOUN
fuelectenerg-384	2	19	capacitive	capacitive	ADJ
fuelectenerg-384	2	20	switches	switch	NOUN
fuelectenerg-384	2	21			PUNCT
fuelectenerg-384	2	22	loukas	loukas	NOUN
fuelectenerg-384	2	23	michalas	michala	NOUN
fuelectenerg-384	2	24	,	,	PUNCT
fuelectenerg-384	2	25	matroni	matroni	PROPN
fuelectenerg-384	2	26	koutsoureli	koutsoureli	PROPN
fuelectenerg-384	2	27	,	,	PUNCT
fuelectenerg-384	2	28	eleni	eleni	PROPN
fuelectenerg-384	2	29	papandreou	papandreou	PROPN
fuelectenerg-384	2	30	,	,	PUNCT
fuelectenerg-384	2	31	anestis	anestis	PROPN
fuelectenerg-384	2	32	gantis	gantis	PROPN
fuelectenerg-384	2	33	,	,	PUNCT
fuelectenerg-384	2	34	george	george	PROPN
fuelectenerg-384	2	35	papaioannou	papaioannou	PROPN
fuelectenerg-384	2	36	solid	solid	ADJ
fuelectenerg-384	2	37	state	state	NOUN
fuelectenerg-384	2	38	section	section	NOUN
fuelectenerg-384	2	39	,	,	PUNCT
fuelectenerg-384	2	40	physics	physics	NOUN
fuelectenerg-384	2	41	department	department	PROPN
fuelectenerg-384	2	42	,	,	PUNCT
fuelectenerg-384	2	43	national	national	PROPN
fuelectenerg-384	2	44	kapodistrian	kapodistrian	PROPN
fuelectenerg-384	2	45	university	university	PROPN
fuelectenerg-384	2	46	of	of	ADP
fuelectenerg-384	2	47	athens	athens	PROPN
fuelectenerg-384	2	48	,	,	PUNCT
fuelectenerg-384	2	49	panepistimiopolis	panepistimiopolis	PROPN
fuelectenerg-384	2	50	zografos	zografos	ADV
fuelectenerg-384	2	51	,	,	PUNCT
fuelectenerg-384	2	52	athens	athens	PROPN
fuelectenerg-384	2	53	15784	15784	NUM
fuelectenerg-384	2	54	,	,	PUNCT
fuelectenerg-384	2	55	greece	greece	PROPN
fuelectenerg-384	2	56	abstract	abstract	PROPN
fuelectenerg-384	2	57	.	.	PUNCT
fuelectenerg-384	3	1	mim	mim	PROPN
fuelectenerg-384	3	2	capacitors	capacitor	NOUN
fuelectenerg-384	3	3	are	be	AUX
fuelectenerg-384	3	4	considered	consider	VERB
fuelectenerg-384	3	5	equally	equally	ADV
fuelectenerg-384	3	6	important	important	ADJ
fuelectenerg-384	3	7	devices	device	NOUN
fuelectenerg-384	3	8	for	for	ADP
fuelectenerg-384	3	9	the	the	DET
fuelectenerg-384	3	10	assessment	assessment	NOUN
fuelectenerg-384	3	11	of	of	ADP
fuelectenerg-384	3	12	dielectric	dielectric	ADJ
fuelectenerg-384	3	13	charging	charging	NOUN
fuelectenerg-384	3	14	in	in	ADP
fuelectenerg-384	3	15	rf	rf	NOUN
fuelectenerg-384	3	16	mems	mem	NOUN
fuelectenerg-384	3	17	capacitive	capacitive	ADJ
fuelectenerg-384	3	18	switches	switch	NOUN
fuelectenerg-384	3	19	.	.	PUNCT
fuelectenerg-384	4	1	beside	beside	ADP
fuelectenerg-384	4	2	the	the	DET
fuelectenerg-384	4	3	obvious	obvious	ADJ
fuelectenerg-384	4	4	similarities	similarity	NOUN
fuelectenerg-384	4	5	between	between	ADP
fuelectenerg-384	4	6	the	the	DET
fuelectenerg-384	4	7	down	down	ADJ
fuelectenerg-384	4	8	state	state	NOUN
fuelectenerg-384	4	9	condition	condition	NOUN
fuelectenerg-384	4	10	of	of	ADP
fuelectenerg-384	4	11	rf	rf	NOUN
fuelectenerg-384	4	12	mems	mem	NOUN
fuelectenerg-384	4	13	and	and	CCONJ
fuelectenerg-384	4	14	mim	mim	PROPN
fuelectenerg-384	4	15	capacitors	capacitor	NOUN
fuelectenerg-384	4	16	there	there	PRON
fuelectenerg-384	4	17	are	be	VERB
fuelectenerg-384	4	18	also	also	ADV
fuelectenerg-384	4	19	some	some	DET
fuelectenerg-384	4	20	important	important	ADJ
fuelectenerg-384	4	21	differences	difference	NOUN
fuelectenerg-384	4	22	.	.	PUNCT
fuelectenerg-384	5	1	the	the	DET
fuelectenerg-384	5	2	paper	paper	NOUN
fuelectenerg-384	5	3	aims	aim	VERB
fuelectenerg-384	5	4	to	to	PART
fuelectenerg-384	5	5	introduce	introduce	VERB
fuelectenerg-384	5	6	a	a	DET
fuelectenerg-384	5	7	novel	novel	ADJ
fuelectenerg-384	5	8	approach	approach	NOUN
fuelectenerg-384	5	9	to	to	ADP
fuelectenerg-384	5	10	the	the	DET
fuelectenerg-384	5	11	study	study	NOUN
fuelectenerg-384	5	12	of	of	ADP
fuelectenerg-384	5	13	dielectric	dielectric	ADJ
fuelectenerg-384	5	14	charging	charging	NOUN
fuelectenerg-384	5	15	in	in	ADP
fuelectenerg-384	5	16	mems	mem	NOUN
fuelectenerg-384	5	17	with	with	ADP
fuelectenerg-384	5	18	the	the	DET
fuelectenerg-384	5	19	aid	aid	NOUN
fuelectenerg-384	5	20	of	of	ADP
fuelectenerg-384	5	21	mim	mim	PROPN
fuelectenerg-384	5	22	capacitors	capacitor	NOUN
fuelectenerg-384	5	23	by	by	ADP
fuelectenerg-384	5	24	combining	combine	VERB
fuelectenerg-384	5	25	experimental	experimental	ADJ
fuelectenerg-384	5	26	results	result	NOUN
fuelectenerg-384	5	27	obtained	obtain	VERB
fuelectenerg-384	5	28	by	by	ADP
fuelectenerg-384	5	29	the	the	DET
fuelectenerg-384	5	30	application	application	NOUN
fuelectenerg-384	5	31	of	of	ADP
fuelectenerg-384	5	32	dc	dc	PROPN
fuelectenerg-384	5	33	,	,	PUNCT
fuelectenerg-384	5	34	charging	charge	VERB
fuelectenerg-384	5	35	transient	transient	NOUN
fuelectenerg-384	5	36	and	and	CCONJ
fuelectenerg-384	5	37	kelvin	kelvin	PROPN
fuelectenerg-384	5	38	probe	probe	PROPN
fuelectenerg-384	5	39	techniques	technique	NOUN
fuelectenerg-384	5	40	.	.	PUNCT
fuelectenerg-384	6	1	the	the	DET
fuelectenerg-384	6	2	strengths	strength	NOUN
fuelectenerg-384	6	3	and	and	CCONJ
fuelectenerg-384	6	4	weaknesses	weakness	NOUN
fuelectenerg-384	6	5	are	be	AUX
fuelectenerg-384	6	6	discussed	discuss	VERB
fuelectenerg-384	6	7	in	in	ADP
fuelectenerg-384	6	8	conjunction	conjunction	NOUN
fuelectenerg-384	6	9	with	with	ADP
fuelectenerg-384	6	10	experimental	experimental	ADJ
fuelectenerg-384	6	11	results	result	NOUN
fuelectenerg-384	6	12	obtained	obtain	VERB
fuelectenerg-384	6	13	on	on	ADP
fuelectenerg-384	6	14	sinx	sinx	PROPN
fuelectenerg-384	6	15	based	base	VERB
fuelectenerg-384	6	16	mim	mim	PROPN
fuelectenerg-384	6	17	capacitors	capacitor	NOUN
fuelectenerg-384	6	18	and	and	CCONJ
fuelectenerg-384	6	19	mems	mem	VERB
fuelectenerg-384	6	20	capacitive	capacitive	ADJ
fuelectenerg-384	6	21	switches	switch	NOUN
fuelectenerg-384	6	22	fabricated	fabricate	VERB
fuelectenerg-384	6	23	under	under	ADP
fuelectenerg-384	6	24	the	the	DET
fuelectenerg-384	6	25	same	same	ADJ
fuelectenerg-384	6	26	conditions	condition	NOUN
fuelectenerg-384	6	27	.	.	PUNCT
fuelectenerg-384	7	1	key	key	ADJ
fuelectenerg-384	7	2	words	word	NOUN
fuelectenerg-384	7	3	:	:	PUNCT
fuelectenerg-384	7	4	rf	rf	NUM
fuelectenerg-384	7	5	mems	mem	NOUN
fuelectenerg-384	7	6	,	,	PUNCT
fuelectenerg-384	7	7	mim	mim	PROPN
fuelectenerg-384	7	8	,	,	PUNCT
fuelectenerg-384	7	9	dielectric	dielectric	ADJ
fuelectenerg-384	7	10	charging	charging	NOUN
fuelectenerg-384	7	11	,	,	PUNCT
fuelectenerg-384	7	12	reliability	reliability	NOUN
fuelectenerg-384	7	13	1	1	NUM
fuelectenerg-384	7	14	.	.	PUNCT
fuelectenerg-384	8	1	introduction	introduction	NOUN
fuelectenerg-384	8	2	micro	micro	PROPN
fuelectenerg-384	8	3	electro	electro	VERB
fuelectenerg-384	8	4	mechanical	mechanical	ADJ
fuelectenerg-384	8	5	system	system	NOUN
fuelectenerg-384	8	6	(	(	PUNCT
fuelectenerg-384	8	7	mems	mems	NOUN
fuelectenerg-384	8	8	)	)	PUNCT
fuelectenerg-384	8	9	capacitive	capacitive	ADJ
fuelectenerg-384	8	10	switches	switch	NOUN
fuelectenerg-384	8	11	have	have	AUX
fuelectenerg-384	8	12	received	receive	VERB
fuelectenerg-384	8	13	important	important	ADJ
fuelectenerg-384	8	14	research	research	NOUN
fuelectenerg-384	8	15	attention	attention	NOUN
fuelectenerg-384	8	16	over	over	ADP
fuelectenerg-384	8	17	the	the	DET
fuelectenerg-384	8	18	last	last	ADJ
fuelectenerg-384	8	19	two	two	NUM
fuelectenerg-384	8	20	decades	decade	NOUN
fuelectenerg-384	8	21	mainly	mainly	ADV
fuelectenerg-384	8	22	due	due	ADP
fuelectenerg-384	8	23	to	to	ADP
fuelectenerg-384	8	24	their	their	PRON
fuelectenerg-384	8	25	potential	potential	ADJ
fuelectenerg-384	8	26	implementation	implementation	NOUN
fuelectenerg-384	8	27	on	on	ADP
fuelectenerg-384	8	28	rf	rf	NOUN
fuelectenerg-384	8	29	applications	application	NOUN
fuelectenerg-384	8	30	such	such	ADJ
fuelectenerg-384	8	31	as	as	ADP
fuelectenerg-384	8	32	filters	filter	NOUN
fuelectenerg-384	8	33	and	and	CCONJ
fuelectenerg-384	8	34	antennas	antenna	NOUN
fuelectenerg-384	8	35	[	[	X
fuelectenerg-384	8	36	1	1	NUM
fuelectenerg-384	8	37	]	]	PUNCT
fuelectenerg-384	8	38	.	.	PUNCT
fuelectenerg-384	9	1	however	however	ADV
fuelectenerg-384	9	2	,	,	PUNCT
fuelectenerg-384	9	3	although	although	SCONJ
fuelectenerg-384	9	4	they	they	PRON
fuelectenerg-384	9	5	offer	offer	VERB
fuelectenerg-384	9	6	several	several	ADJ
fuelectenerg-384	9	7	advantages	advantage	NOUN
fuelectenerg-384	9	8	over	over	ADP
fuelectenerg-384	9	9	their	their	PRON
fuelectenerg-384	9	10	conventional	conventional	ADJ
fuelectenerg-384	9	11	semiconductor	semiconductor	NOUN
fuelectenerg-384	9	12	counterparts	counterpart	NOUN
fuelectenerg-384	9	13	,	,	PUNCT
fuelectenerg-384	9	14	such	such	ADJ
fuelectenerg-384	9	15	as	as	ADP
fuelectenerg-384	9	16	lower	low	ADJ
fuelectenerg-384	9	17	power	power	NOUN
fuelectenerg-384	9	18	consumption	consumption	NOUN
fuelectenerg-384	9	19	and	and	CCONJ
fuelectenerg-384	9	20	high	high	ADJ
fuelectenerg-384	9	21	linearity	linearity	NOUN
fuelectenerg-384	9	22	,	,	PUNCT
fuelectenerg-384	9	23	their	their	PRON
fuelectenerg-384	9	24	commercialization	commercialization	NOUN
fuelectenerg-384	9	25	is	be	AUX
fuelectenerg-384	9	26	still	still	ADV
fuelectenerg-384	9	27	hindered	hinder	VERB
fuelectenerg-384	9	28	by	by	ADP
fuelectenerg-384	9	29	reliability	reliability	NOUN
fuelectenerg-384	9	30	issues	issue	NOUN
fuelectenerg-384	9	31	mainly	mainly	ADV
fuelectenerg-384	9	32	related	relate	VERB
fuelectenerg-384	9	33	to	to	ADP
fuelectenerg-384	9	34	dielectric	dielectric	ADJ
fuelectenerg-384	9	35	charging	charging	NOUN
fuelectenerg-384	9	36	.	.	PUNCT
fuelectenerg-384	10	1	regarding	regard	VERB
fuelectenerg-384	10	2	the	the	DET
fuelectenerg-384	10	3	dielectric	dielectric	ADJ
fuelectenerg-384	10	4	charging	charging	NOUN
fuelectenerg-384	10	5	,	,	PUNCT
fuelectenerg-384	10	6	three	three	NUM
fuelectenerg-384	10	7	major	major	ADJ
fuelectenerg-384	10	8	modes	mode	NOUN
fuelectenerg-384	10	9	are	be	AUX
fuelectenerg-384	10	10	acknowledged	acknowledge	VERB
fuelectenerg-384	10	11	as	as	ADP
fuelectenerg-384	10	12	responsible	responsible	ADJ
fuelectenerg-384	10	13	up	up	ADP
fuelectenerg-384	10	14	to	to	ADP
fuelectenerg-384	10	15	date	date	NOUN
fuelectenerg-384	10	16	.	.	PUNCT
fuelectenerg-384	11	1	two	two	NUM
fuelectenerg-384	11	2	of	of	ADP
fuelectenerg-384	11	3	them	they	PRON
fuelectenerg-384	11	4	are	be	AUX
fuelectenerg-384	11	5	usually	usually	ADV
fuelectenerg-384	11	6	referred	refer	VERB
fuelectenerg-384	11	7	as	as	ADP
fuelectenerg-384	11	8	contactless	contactless	NOUN
fuelectenerg-384	11	9	charging	charging	NOUN
fuelectenerg-384	11	10	and	and	CCONJ
fuelectenerg-384	11	11	arise	arise	VERB
fuelectenerg-384	11	12	by	by	ADP
fuelectenerg-384	11	13	either	either	DET
fuelectenerg-384	11	14	redistribution	redistribution	NOUN
fuelectenerg-384	11	15	of	of	ADP
fuelectenerg-384	11	16	internal	internal	ADJ
fuelectenerg-384	11	17	charges	charge	NOUN
fuelectenerg-384	11	18	and/or	and/or	CCONJ
fuelectenerg-384	11	19	dipoles	dipole	VERB
fuelectenerg-384	11	20	orientation	orientation	NOUN
fuelectenerg-384	11	21	[	[	X
fuelectenerg-384	11	22	2	2	NUM
fuelectenerg-384	11	23	-	-	SYM
fuelectenerg-384	11	24	4	4	NUM
fuelectenerg-384	11	25	]	]	PUNCT
fuelectenerg-384	11	26	,	,	PUNCT
fuelectenerg-384	11	27	or	or	CCONJ
fuelectenerg-384	11	28	by	by	ADP
fuelectenerg-384	11	29	injection	injection	NOUN
fuelectenerg-384	11	30	of	of	ADP
fuelectenerg-384	11	31	electrons	electron	NOUN
fuelectenerg-384	11	32	emitted	emit	VERB
fuelectenerg-384	11	33	by	by	ADP
fuelectenerg-384	11	34	asperities	asperity	NOUN
fuelectenerg-384	11	35	at	at	ADP
fuelectenerg-384	11	36	the	the	DET
fuelectenerg-384	11	37	bottom	bottom	NOUN
fuelectenerg-384	11	38	of	of	ADP
fuelectenerg-384	11	39	the	the	DET
fuelectenerg-384	11	40	metal	metal	NOUN
fuelectenerg-384	11	41	bridge	bridge	NOUN
fuelectenerg-384	11	42	due	due	ADJ
fuelectenerg-384	11	43	to	to	ADP
fuelectenerg-384	11	44	field	field	NOUN
fuelectenerg-384	11	45	emission	emission	NOUN
fuelectenerg-384	11	46	[	[	X
fuelectenerg-384	11	47	5,6	5,6	NUM
fuelectenerg-384	11	48	]	]	X
fuelectenerg-384	11	49	.	.	PUNCT
fuelectenerg-384	12	1	such	such	ADJ
fuelectenerg-384	12	2	effects	effect	NOUN
fuelectenerg-384	12	3	occur	occur	VERB
fuelectenerg-384	12	4	in	in	ADP
fuelectenerg-384	12	5	the	the	DET
fuelectenerg-384	12	6	non	non	ADJ
fuelectenerg-384	12	7	contact	contact	NOUN
fuelectenerg-384	12	8	areas	area	NOUN
fuelectenerg-384	12	9	that	that	PRON
fuelectenerg-384	12	10	are	be	AUX
fuelectenerg-384	12	11	formed	form	VERB
fuelectenerg-384	12	12	between	between	ADP
fuelectenerg-384	12	13	the	the	DET
fuelectenerg-384	12	14	dielectric	dielectric	ADJ
fuelectenerg-384	12	15	film	film	NOUN
fuelectenerg-384	12	16	and	and	CCONJ
fuelectenerg-384	12	17	the	the	DET
fuelectenerg-384	12	18	bridge	bridge	NOUN
fuelectenerg-384	12	19	in	in	ADP
fuelectenerg-384	12	20	the	the	DET
fuelectenerg-384	12	21	down	down	ADJ
fuelectenerg-384	12	22	state	state	NOUN
fuelectenerg-384	12	23	condition	condition	NOUN
fuelectenerg-384	12	24	due	due	ADP
fuelectenerg-384	12	25	to	to	ADP
fuelectenerg-384	12	26	surface	surface	NOUN
fuelectenerg-384	12	27	roughness	roughness	NOUN
fuelectenerg-384	12	28	but	but	CCONJ
fuelectenerg-384	12	29	also	also	ADV
fuelectenerg-384	12	30	in	in	ADP
fuelectenerg-384	12	31	the	the	DET
fuelectenerg-384	12	32	up	up	ADJ
fuelectenerg-384	12	33	state	state	NOUN
fuelectenerg-384	12	34	before	before	ADP
fuelectenerg-384	12	35	the	the	DET
fuelectenerg-384	12	36	device	device	NOUN
fuelectenerg-384	12	37	actuation	actuation	NOUN
fuelectenerg-384	12	38	.	.	PUNCT
fuelectenerg-384	13	1	the	the	DET
fuelectenerg-384	13	2	third	third	ADJ
fuelectenerg-384	13	3	and	and	CCONJ
fuelectenerg-384	13	4	most	most	ADV
fuelectenerg-384	13	5	well	well	ADV
fuelectenerg-384	13	6	studied	study	VERB
fuelectenerg-384	13	7	charging	charge	VERB
fuelectenerg-384	13	8	mode	mode	NOUN
fuelectenerg-384	13	9	occurs	occur	VERB
fuelectenerg-384	13	10	received	receive	VERB
fuelectenerg-384	13	11	july	july	PROPN
fuelectenerg-384	13	12	28	28	NUM
fuelectenerg-384	13	13	,	,	PUNCT
fuelectenerg-384	13	14	2014	2014	NUM
fuelectenerg-384	13	15	;	;	PUNCT
fuelectenerg-384	13	16	received	receive	VERB
fuelectenerg-384	13	17	in	in	ADP
fuelectenerg-384	13	18	revised	revise	VERB
fuelectenerg-384	13	19	form	form	NOUN
fuelectenerg-384	13	20	september	september	PROPN
fuelectenerg-384	13	21	24	24	NUM
fuelectenerg-384	13	22	,	,	PUNCT
fuelectenerg-384	13	23	2014	2014	NUM
fuelectenerg-384	13	24	corresponding	correspond	VERB
fuelectenerg-384	13	25	author	author	NOUN
fuelectenerg-384	13	26	:	:	PUNCT
fuelectenerg-384	13	27	loukas	loukas	PROPN
fuelectenerg-384	13	28	michalas	michala	VERB
fuelectenerg-384	13	29	solid	solid	ADJ
fuelectenerg-384	13	30	state	state	NOUN
fuelectenerg-384	13	31	section	section	NOUN
fuelectenerg-384	13	32	,	,	PUNCT
fuelectenerg-384	13	33	physics	physics	NOUN
fuelectenerg-384	13	34	department	department	PROPN
fuelectenerg-384	13	35	,	,	PUNCT
fuelectenerg-384	13	36	national	national	PROPN
fuelectenerg-384	13	37	kapodistrian	kapodistrian	PROPN
fuelectenerg-384	13	38	university	university	PROPN
fuelectenerg-384	13	39	of	of	ADP
fuelectenerg-384	13	40	athens	athens	PROPN
fuelectenerg-384	13	41	,	,	PUNCT
fuelectenerg-384	13	42	panepistimiopolis	panepistimiopolis	PROPN
fuelectenerg-384	13	43	zografos	zografos	ADV
fuelectenerg-384	13	44	,	,	PUNCT
fuelectenerg-384	13	45	athens	athens	PROPN
fuelectenerg-384	13	46	15784	15784	NUM
fuelectenerg-384	13	47	,	,	PUNCT
fuelectenerg-384	13	48	greece	greece	PROPN
fuelectenerg-384	13	49	(	(	PUNCT
fuelectenerg-384	13	50	e	e	NOUN
fuelectenerg-384	13	51	-	-	NOUN
fuelectenerg-384	13	52	mail	mail	NOUN
fuelectenerg-384	13	53	:	:	PUNCT
fuelectenerg-384	13	54	lmichal@phys.uoa.gr	lmichal@phys.uoa.gr	ADJ
fuelectenerg-384	13	55	)	)	PUNCT
fuelectenerg-384	13	56	114	114	NUM
fuelectenerg-384	13	57	l.	l.	PROPN
fuelectenerg-384	13	58	michalas	michalas	PROPN
fuelectenerg-384	13	59	,	,	PUNCT
fuelectenerg-384	13	60	m.	m.	PROPN
fuelectenerg-384	13	61	koutsoureli	koutsoureli	PROPN
fuelectenerg-384	13	62	,	,	PUNCT
fuelectenerg-384	13	63	e.	e.	PROPN
fuelectenerg-384	13	64	papandreou	papandreou	PROPN
fuelectenerg-384	13	65	,	,	PUNCT
fuelectenerg-384	13	66	a.	a.	PROPN
fuelectenerg-384	13	67	gantis	gantis	PROPN
fuelectenerg-384	13	68	,	,	PUNCT
fuelectenerg-384	13	69	g.	g.	PROPN
fuelectenerg-384	13	70	papaioannou	papaioannou	PROPN
fuelectenerg-384	13	71	with	with	ADP
fuelectenerg-384	13	72	the	the	DET
fuelectenerg-384	13	73	bridge	bridge	NOUN
fuelectenerg-384	13	74	in	in	ADP
fuelectenerg-384	13	75	the	the	DET
fuelectenerg-384	13	76	down	down	ADJ
fuelectenerg-384	13	77	state	state	NOUN
fuelectenerg-384	13	78	and	and	CCONJ
fuelectenerg-384	13	79	therefore	therefore	ADV
fuelectenerg-384	13	80	is	be	AUX
fuelectenerg-384	13	81	referred	refer	VERB
fuelectenerg-384	13	82	as	as	ADP
fuelectenerg-384	13	83	contacted	contact	VERB
fuelectenerg-384	13	84	charging	charging	NOUN
fuelectenerg-384	13	85	.	.	PUNCT
fuelectenerg-384	14	1	in	in	ADP
fuelectenerg-384	14	2	this	this	DET
fuelectenerg-384	14	3	case	case	NOUN
fuelectenerg-384	14	4	charges	charge	NOUN
fuelectenerg-384	14	5	are	be	AUX
fuelectenerg-384	14	6	injected	inject	VERB
fuelectenerg-384	14	7	from	from	ADP
fuelectenerg-384	14	8	the	the	DET
fuelectenerg-384	14	9	metal	metal	NOUN
fuelectenerg-384	14	10	electrodes	electrode	NOUN
fuelectenerg-384	14	11	under	under	ADP
fuelectenerg-384	14	12	the	the	DET
fuelectenerg-384	14	13	presence	presence	NOUN
fuelectenerg-384	14	14	of	of	ADP
fuelectenerg-384	14	15	an	an	DET
fuelectenerg-384	14	16	electric	electric	ADJ
fuelectenerg-384	14	17	field	field	NOUN
fuelectenerg-384	14	18	in	in	ADP
fuelectenerg-384	14	19	the	the	DET
fuelectenerg-384	14	20	range	range	NOUN
fuelectenerg-384	14	21	of	of	ADP
fuelectenerg-384	14	22	mv	mv	PROPN
fuelectenerg-384	14	23	/	/	SYM
fuelectenerg-384	14	24	cm	cm	NOUN
fuelectenerg-384	14	25	.	.	PUNCT
fuelectenerg-384	15	1	the	the	DET
fuelectenerg-384	15	2	commonly	commonly	ADV
fuelectenerg-384	15	3	used	use	VERB
fuelectenerg-384	15	4	dielectric	dielectric	NOUN
fuelectenerg-384	15	5	,	,	PUNCT
fuelectenerg-384	15	6	low	low	ADJ
fuelectenerg-384	15	7	temperature	temperature	NOUN
fuelectenerg-384	15	8	deposited	deposit	VERB
fuelectenerg-384	15	9	sinx	sinx	NOUN
fuelectenerg-384	15	10	,	,	PUNCT
fuelectenerg-384	15	11	contains	contain	VERB
fuelectenerg-384	15	12	a	a	DET
fuelectenerg-384	15	13	large	large	ADJ
fuelectenerg-384	15	14	amount	amount	NOUN
fuelectenerg-384	15	15	of	of	ADP
fuelectenerg-384	15	16	electrically	electrically	ADV
fuelectenerg-384	15	17	active	active	ADJ
fuelectenerg-384	15	18	defects	defect	NOUN
fuelectenerg-384	15	19	and	and	CCONJ
fuelectenerg-384	15	20	may	may	AUX
fuelectenerg-384	15	21	store	store	VERB
fuelectenerg-384	15	22	these	these	DET
fuelectenerg-384	15	23	injected	inject	VERB
fuelectenerg-384	15	24	charges	charge	NOUN
fuelectenerg-384	15	25	for	for	ADP
fuelectenerg-384	15	26	times	time	NOUN
fuelectenerg-384	15	27	longer	long	ADJ
fuelectenerg-384	15	28	than	than	ADP
fuelectenerg-384	15	29	10	10	NUM
fuelectenerg-384	15	30	4	4	NUM
fuelectenerg-384	15	31	sec	sec	PROPN
fuelectenerg-384	15	32	[	[	X
fuelectenerg-384	15	33	7	7	NUM
fuelectenerg-384	15	34	]	]	PUNCT
fuelectenerg-384	15	35	.	.	PUNCT
fuelectenerg-384	16	1	the	the	DET
fuelectenerg-384	16	2	stored	store	VERB
fuelectenerg-384	16	3	charges	charge	NOUN
fuelectenerg-384	16	4	are	be	AUX
fuelectenerg-384	16	5	responsible	responsible	ADJ
fuelectenerg-384	16	6	for	for	ADP
fuelectenerg-384	16	7	several	several	ADJ
fuelectenerg-384	16	8	undesirable	undesirable	ADJ
fuelectenerg-384	16	9	effects	effect	NOUN
fuelectenerg-384	16	10	such	such	ADJ
fuelectenerg-384	16	11	as	as	ADP
fuelectenerg-384	16	12	shift	shift	NOUN
fuelectenerg-384	16	13	of	of	ADP
fuelectenerg-384	16	14	c	c	NOUN
fuelectenerg-384	16	15	-	-	PUNCT
fuelectenerg-384	16	16	v	v	NOUN
fuelectenerg-384	16	17	characteristics	characteristic	NOUN
fuelectenerg-384	16	18	,	,	PUNCT
fuelectenerg-384	16	19	narrowing	narrow	VERB
fuelectenerg-384	16	20	of	of	ADP
fuelectenerg-384	16	21	pull	pull	NOUN
fuelectenerg-384	16	22	-	-	PUNCT
fuelectenerg-384	16	23	in	in	ADP
fuelectenerg-384	16	24	/	/	SYM
fuelectenerg-384	16	25	out	out	ADP
fuelectenerg-384	16	26	windows	window	NOUN
fuelectenerg-384	16	27	,	,	PUNCT
fuelectenerg-384	16	28	degradation	degradation	NOUN
fuelectenerg-384	16	29	of	of	ADP
fuelectenerg-384	16	30	the	the	DET
fuelectenerg-384	16	31	ratio	ratio	NOUN
fuelectenerg-384	16	32	cdown	cdown	NOUN
fuelectenerg-384	16	33	/	/	SYM
fuelectenerg-384	16	34	cup	cup	PROPN
fuelectenerg-384	16	35	and	and	CCONJ
fuelectenerg-384	16	36	finally	finally	ADV
fuelectenerg-384	16	37	lead	lead	VERB
fuelectenerg-384	16	38	to	to	ADP
fuelectenerg-384	16	39	device	device	NOUN
fuelectenerg-384	16	40	failure	failure	NOUN
fuelectenerg-384	16	41	due	due	ADP
fuelectenerg-384	16	42	to	to	ADP
fuelectenerg-384	16	43	bridge	bridge	NOUN
fuelectenerg-384	16	44	stiction	stiction	NOUN
fuelectenerg-384	16	45	[	[	X
fuelectenerg-384	16	46	8,9	8,9	NUM
fuelectenerg-384	16	47	]	]	PUNCT
fuelectenerg-384	16	48	.	.	PUNCT
fuelectenerg-384	17	1	contact	contact	NOUN
fuelectenerg-384	17	2	mode	mode	NOUN
fuelectenerg-384	17	3	dielectric	dielectric	ADJ
fuelectenerg-384	17	4	charging	charging	NOUN
fuelectenerg-384	17	5	has	have	AUX
fuelectenerg-384	17	6	been	be	AUX
fuelectenerg-384	17	7	assessed	assess	VERB
fuelectenerg-384	17	8	with	with	ADP
fuelectenerg-384	17	9	a	a	DET
fuelectenerg-384	17	10	variety	variety	NOUN
fuelectenerg-384	17	11	of	of	ADP
fuelectenerg-384	17	12	experimental	experimental	ADJ
fuelectenerg-384	17	13	techniques	technique	NOUN
fuelectenerg-384	17	14	and	and	CCONJ
fuelectenerg-384	17	15	by	by	ADP
fuelectenerg-384	17	16	several	several	ADJ
fuelectenerg-384	17	17	research	research	NOUN
fuelectenerg-384	17	18	groups	group	NOUN
fuelectenerg-384	17	19	world	world	NOUN
fuelectenerg-384	17	20	wide	wide	ADV
fuelectenerg-384	17	21	over	over	ADP
fuelectenerg-384	17	22	the	the	DET
fuelectenerg-384	17	23	last	last	ADJ
fuelectenerg-384	17	24	years	year	NOUN
fuelectenerg-384	17	25	[	[	X
fuelectenerg-384	17	26	10	10	NUM
fuelectenerg-384	17	27	]	]	PUNCT
fuelectenerg-384	17	28	.	.	PUNCT
fuelectenerg-384	18	1	beyond	beyond	ADP
fuelectenerg-384	18	2	the	the	DET
fuelectenerg-384	18	3	studies	study	NOUN
fuelectenerg-384	18	4	directly	directly	ADV
fuelectenerg-384	18	5	applicable	applicable	ADJ
fuelectenerg-384	18	6	on	on	ADP
fuelectenerg-384	18	7	rf	rf	NOUN
fuelectenerg-384	18	8	mems	mem	NOUN
fuelectenerg-384	18	9	switches	switch	NOUN
fuelectenerg-384	18	10	,	,	PUNCT
fuelectenerg-384	18	11	equally	equally	ADV
fuelectenerg-384	18	12	important	important	ADJ
fuelectenerg-384	18	13	research	research	NOUN
fuelectenerg-384	18	14	takes	take	VERB
fuelectenerg-384	18	15	place	place	NOUN
fuelectenerg-384	18	16	on	on	ADP
fuelectenerg-384	18	17	metal	metal	NOUN
fuelectenerg-384	18	18	insulator	insulator	NOUN
fuelectenerg-384	18	19	metal	metal	NOUN
fuelectenerg-384	18	20	(	(	PUNCT
fuelectenerg-384	18	21	mim	mim	PROPN
fuelectenerg-384	18	22	)	)	PUNCT
fuelectenerg-384	18	23	capacitors	capacitor	NOUN
fuelectenerg-384	18	24	.	.	PUNCT
fuelectenerg-384	19	1	the	the	DET
fuelectenerg-384	19	2	dielectric	dielectric	ADJ
fuelectenerg-384	19	3	charging	charging	NOUN
fuelectenerg-384	19	4	in	in	ADP
fuelectenerg-384	19	5	mim	mim	PROPN
fuelectenerg-384	19	6	capacitors	capacitor	NOUN
fuelectenerg-384	19	7	has	have	AUX
fuelectenerg-384	19	8	been	be	AUX
fuelectenerg-384	19	9	investigated	investigate	VERB
fuelectenerg-384	19	10	with	with	ADP
fuelectenerg-384	19	11	the	the	DET
fuelectenerg-384	19	12	aid	aid	NOUN
fuelectenerg-384	19	13	of	of	ADP
fuelectenerg-384	19	14	charge	charge	NOUN
fuelectenerg-384	19	15	/	/	SYM
fuelectenerg-384	19	16	discharge	discharge	NOUN
fuelectenerg-384	19	17	current	current	ADJ
fuelectenerg-384	19	18	transients	transient	NOUN
fuelectenerg-384	19	19	(	(	PUNCT
fuelectenerg-384	19	20	cct	cct	PROPN
fuelectenerg-384	19	21	/	/	SYM
fuelectenerg-384	19	22	dct	dct	PROPN
fuelectenerg-384	19	23	)	)	PUNCT
fuelectenerg-384	20	1	[	[	X
fuelectenerg-384	20	2	11	11	NUM
fuelectenerg-384	20	3	]	]	PUNCT
fuelectenerg-384	20	4	,	,	PUNCT
fuelectenerg-384	20	5	by	by	ADP
fuelectenerg-384	20	6	thermally	thermally	ADV
fuelectenerg-384	20	7	stimulated	stimulate	VERB
fuelectenerg-384	20	8	depolarization	depolarization	NOUN
fuelectenerg-384	20	9	/	/	SYM
fuelectenerg-384	20	10	polarization	polarization	NOUN
fuelectenerg-384	20	11	currents	current	NOUN
fuelectenerg-384	20	12	(	(	PUNCT
fuelectenerg-384	20	13	tsdc	tsdc	NOUN
fuelectenerg-384	20	14	/	/	SYM
fuelectenerg-384	20	15	tspc	tspc	NOUN
fuelectenerg-384	20	16	)	)	PUNCT
fuelectenerg-384	21	1	[	[	X
fuelectenerg-384	21	2	12,13	12,13	NUM
fuelectenerg-384	21	3	]	]	PUNCT
fuelectenerg-384	21	4	and	and	CCONJ
fuelectenerg-384	21	5	by	by	ADP
fuelectenerg-384	21	6	kelvin	kelvin	PROPN
fuelectenerg-384	21	7	probe	probe	PROPN
fuelectenerg-384	21	8	force	force	PROPN
fuelectenerg-384	21	9	microscopy	microscopy	PROPN
fuelectenerg-384	21	10	(	(	PUNCT
fuelectenerg-384	21	11	kpfm	kpfm	NOUN
fuelectenerg-384	21	12	)	)	PUNCT
fuelectenerg-384	22	1	[	[	X
fuelectenerg-384	22	2	14	14	NUM
fuelectenerg-384	22	3	]	]	PUNCT
fuelectenerg-384	22	4	.	.	PUNCT
fuelectenerg-384	23	1	in	in	ADP
fuelectenerg-384	23	2	addition	addition	NOUN
fuelectenerg-384	23	3	,	,	PUNCT
fuelectenerg-384	23	4	combinations	combination	NOUN
fuelectenerg-384	23	5	of	of	ADP
fuelectenerg-384	23	6	the	the	DET
fuelectenerg-384	23	7	above	above	ADJ
fuelectenerg-384	23	8	techniques	technique	NOUN
fuelectenerg-384	23	9	have	have	AUX
fuelectenerg-384	23	10	been	be	AUX
fuelectenerg-384	23	11	also	also	ADV
fuelectenerg-384	23	12	implemented	implement	VERB
fuelectenerg-384	23	13	in	in	ADP
fuelectenerg-384	23	14	order	order	NOUN
fuelectenerg-384	23	15	to	to	PART
fuelectenerg-384	23	16	clarify	clarify	VERB
fuelectenerg-384	23	17	the	the	DET
fuelectenerg-384	23	18	importance	importance	NOUN
fuelectenerg-384	23	19	of	of	ADP
fuelectenerg-384	23	20	mim	mim	PROPN
fuelectenerg-384	23	21	structure	structure	NOUN
fuelectenerg-384	23	22	[	[	X
fuelectenerg-384	23	23	15	15	NUM
fuelectenerg-384	23	24	]	]	PUNCT
fuelectenerg-384	23	25	and	and	CCONJ
fuelectenerg-384	23	26	of	of	ADP
fuelectenerg-384	23	27	the	the	DET
fuelectenerg-384	23	28	dielectric	dielectric	ADJ
fuelectenerg-384	23	29	film	film	NOUN
fuelectenerg-384	23	30	deposition	deposition	NOUN
fuelectenerg-384	23	31	condition	condition	NOUN
fuelectenerg-384	23	32	on	on	ADP
fuelectenerg-384	23	33	the	the	DET
fuelectenerg-384	23	34	characteristics	characteristic	NOUN
fuelectenerg-384	23	35	of	of	ADP
fuelectenerg-384	23	36	dielectric	dielectric	ADJ
fuelectenerg-384	23	37	charging	charging	NOUN
fuelectenerg-384	23	38	[	[	X
fuelectenerg-384	23	39	16	16	NUM
fuelectenerg-384	23	40	-	-	SYM
fuelectenerg-384	23	41	18	18	NUM
fuelectenerg-384	23	42	]	]	PUNCT
fuelectenerg-384	23	43	.	.	PUNCT
fuelectenerg-384	24	1	indeed	indeed	ADV
fuelectenerg-384	24	2	the	the	DET
fuelectenerg-384	24	3	study	study	NOUN
fuelectenerg-384	24	4	of	of	ADP
fuelectenerg-384	24	5	mim	mim	PROPN
fuelectenerg-384	24	6	capacitors	capacitor	NOUN
fuelectenerg-384	24	7	has	have	VERB
fuelectenerg-384	24	8	advantages	advantage	NOUN
fuelectenerg-384	24	9	since	since	SCONJ
fuelectenerg-384	24	10	it	it	PRON
fuelectenerg-384	24	11	resembles	resemble	VERB
fuelectenerg-384	24	12	the	the	DET
fuelectenerg-384	24	13	ideal	ideal	NOUN
fuelectenerg-384	24	14	down	down	ADP
fuelectenerg-384	24	15	state	state	NOUN
fuelectenerg-384	24	16	condition	condition	NOUN
fuelectenerg-384	24	17	of	of	ADP
fuelectenerg-384	24	18	mems	mems	ADJ
fuelectenerg-384	24	19	switches	switch	NOUN
fuelectenerg-384	24	20	from	from	ADP
fuelectenerg-384	24	21	the	the	DET
fuelectenerg-384	24	22	macroscopic	macroscopic	ADJ
fuelectenerg-384	24	23	point	point	NOUN
fuelectenerg-384	24	24	of	of	ADP
fuelectenerg-384	24	25	view	view	NOUN
fuelectenerg-384	24	26	and	and	CCONJ
fuelectenerg-384	24	27	also	also	ADV
fuelectenerg-384	24	28	it	it	PRON
fuelectenerg-384	24	29	is	be	AUX
fuelectenerg-384	24	30	quite	quite	ADV
fuelectenerg-384	24	31	easier	easy	ADJ
fuelectenerg-384	24	32	to	to	PART
fuelectenerg-384	24	33	fabricate	fabricate	VERB
fuelectenerg-384	24	34	such	such	DET
fuelectenerg-384	24	35	a	a	DET
fuelectenerg-384	24	36	structure	structure	NOUN
fuelectenerg-384	24	37	without	without	ADP
fuelectenerg-384	24	38	moveable	moveable	ADJ
fuelectenerg-384	24	39	parts	part	NOUN
fuelectenerg-384	24	40	.	.	PUNCT
fuelectenerg-384	25	1	however	however	ADV
fuelectenerg-384	25	2	,	,	PUNCT
fuelectenerg-384	25	3	it	it	PRON
fuelectenerg-384	25	4	should	should	AUX
fuelectenerg-384	25	5	be	be	AUX
fuelectenerg-384	25	6	always	always	ADV
fuelectenerg-384	25	7	taken	take	VERB
fuelectenerg-384	25	8	into	into	ADP
fuelectenerg-384	25	9	consideration	consideration	NOUN
fuelectenerg-384	25	10	that	that	SCONJ
fuelectenerg-384	25	11	beside	beside	ADP
fuelectenerg-384	25	12	some	some	DET
fuelectenerg-384	25	13	obvious	obvious	ADJ
fuelectenerg-384	25	14	similarities	similarity	NOUN
fuelectenerg-384	25	15	the	the	DET
fuelectenerg-384	25	16	two	two	NUM
fuelectenerg-384	25	17	devices	device	NOUN
fuelectenerg-384	25	18	also	also	ADV
fuelectenerg-384	25	19	have	have	AUX
fuelectenerg-384	25	20	some	some	DET
fuelectenerg-384	25	21	important	important	ADJ
fuelectenerg-384	25	22	differences	difference	NOUN
fuelectenerg-384	25	23	.	.	PUNCT
fuelectenerg-384	26	1	therefore	therefore	ADV
fuelectenerg-384	26	2	the	the	DET
fuelectenerg-384	26	3	results	result	NOUN
fuelectenerg-384	26	4	obtained	obtain	VERB
fuelectenerg-384	26	5	from	from	ADP
fuelectenerg-384	26	6	mim	mim	PROPN
fuelectenerg-384	26	7	are	be	AUX
fuelectenerg-384	26	8	not	not	PART
fuelectenerg-384	26	9	straightforwardly	straightforwardly	ADV
fuelectenerg-384	26	10	transferred	transfer	VERB
fuelectenerg-384	26	11	to	to	ADP
fuelectenerg-384	26	12	mems	mem	NOUN
fuelectenerg-384	26	13	and	and	CCONJ
fuelectenerg-384	26	14	the	the	DET
fuelectenerg-384	26	15	up	up	NOUN
fuelectenerg-384	26	16	to	to	ADP
fuelectenerg-384	26	17	date	date	NOUN
fuelectenerg-384	26	18	the	the	DET
fuelectenerg-384	26	19	knowledge	knowledge	NOUN
fuelectenerg-384	26	20	obtained	obtain	VERB
fuelectenerg-384	26	21	from	from	ADP
fuelectenerg-384	26	22	the	the	DET
fuelectenerg-384	26	23	study	study	NOUN
fuelectenerg-384	26	24	of	of	ADP
fuelectenerg-384	26	25	mim	mim	PROPN
fuelectenerg-384	26	26	capacitor	capacitor	NOUN
fuelectenerg-384	26	27	only	only	ADV
fuelectenerg-384	26	28	constitutes	constitute	VERB
fuelectenerg-384	26	29	the	the	DET
fuelectenerg-384	26	30	physical	physical	ADJ
fuelectenerg-384	26	31	background	background	NOUN
fuelectenerg-384	26	32	to	to	ADP
fuelectenerg-384	26	33	the	the	DET
fuelectenerg-384	26	34	understanding	understanding	NOUN
fuelectenerg-384	26	35	of	of	ADP
fuelectenerg-384	26	36	mems	mem	NOUN
fuelectenerg-384	26	37	results	result	NOUN
fuelectenerg-384	26	38	.	.	PUNCT
fuelectenerg-384	27	1	the	the	DET
fuelectenerg-384	27	2	present	present	ADJ
fuelectenerg-384	27	3	paper	paper	NOUN
fuelectenerg-384	27	4	introduces	introduce	VERB
fuelectenerg-384	27	5	a	a	DET
fuelectenerg-384	27	6	novel	novel	ADJ
fuelectenerg-384	27	7	approach	approach	NOUN
fuelectenerg-384	27	8	to	to	ADP
fuelectenerg-384	27	9	the	the	DET
fuelectenerg-384	27	10	study	study	NOUN
fuelectenerg-384	27	11	of	of	ADP
fuelectenerg-384	27	12	dielectric	dielectric	ADJ
fuelectenerg-384	27	13	charging	charging	NOUN
fuelectenerg-384	27	14	in	in	ADP
fuelectenerg-384	27	15	mems	mem	NOUN
fuelectenerg-384	27	16	with	with	ADP
fuelectenerg-384	27	17	the	the	DET
fuelectenerg-384	27	18	aid	aid	NOUN
fuelectenerg-384	27	19	of	of	ADP
fuelectenerg-384	27	20	mim	mim	PROPN
fuelectenerg-384	27	21	capacitors	capacitor	NOUN
fuelectenerg-384	27	22	by	by	ADP
fuelectenerg-384	27	23	combining	combine	VERB
fuelectenerg-384	27	24	experimental	experimental	ADJ
fuelectenerg-384	27	25	results	result	NOUN
fuelectenerg-384	27	26	obtained	obtain	VERB
fuelectenerg-384	27	27	by	by	ADP
fuelectenerg-384	27	28	the	the	DET
fuelectenerg-384	27	29	application	application	NOUN
fuelectenerg-384	27	30	of	of	ADP
fuelectenerg-384	27	31	dc	dc	PROPN
fuelectenerg-384	27	32	,	,	PUNCT
fuelectenerg-384	27	33	charging	charge	VERB
fuelectenerg-384	27	34	transient	transient	NOUN
fuelectenerg-384	27	35	and	and	CCONJ
fuelectenerg-384	27	36	kelvin	kelvin	PROPN
fuelectenerg-384	27	37	probe	probe	PROPN
fuelectenerg-384	27	38	(	(	PUNCT
fuelectenerg-384	27	39	kp	kp	INTJ
fuelectenerg-384	27	40	)	)	PUNCT
fuelectenerg-384	27	41	techniques	technique	NOUN
fuelectenerg-384	27	42	.	.	PUNCT
fuelectenerg-384	28	1	the	the	DET
fuelectenerg-384	28	2	study	study	NOUN
fuelectenerg-384	28	3	extends	extend	VERB
fuelectenerg-384	28	4	our	our	PRON
fuelectenerg-384	28	5	previously	previously	ADV
fuelectenerg-384	28	6	published	publish	VERB
fuelectenerg-384	28	7	work	work	NOUN
fuelectenerg-384	28	8	in	in	ADP
fuelectenerg-384	28	9	[	[	X
fuelectenerg-384	28	10	19	19	NUM
fuelectenerg-384	28	11	]	]	PUNCT
fuelectenerg-384	28	12	and	and	CCONJ
fuelectenerg-384	28	13	adds	add	VERB
fuelectenerg-384	28	14	some	some	DET
fuelectenerg-384	28	15	knowledge	knowledge	NOUN
fuelectenerg-384	28	16	on	on	ADP
fuelectenerg-384	28	17	how	how	SCONJ
fuelectenerg-384	28	18	information	information	NOUN
fuelectenerg-384	28	19	obtained	obtain	VERB
fuelectenerg-384	28	20	when	when	SCONJ
fuelectenerg-384	28	21	well	well	ADV
fuelectenerg-384	28	22	accepted	accept	VERB
fuelectenerg-384	28	23	characterization	characterization	NOUN
fuelectenerg-384	28	24	techniques	technique	NOUN
fuelectenerg-384	28	25	applied	apply	VERB
fuelectenerg-384	28	26	on	on	ADP
fuelectenerg-384	28	27	mim	mim	PROPN
fuelectenerg-384	28	28	capacitors	capacitor	NOUN
fuelectenerg-384	28	29	may	may	AUX
fuelectenerg-384	28	30	be	be	AUX
fuelectenerg-384	28	31	transferred	transfer	VERB
fuelectenerg-384	28	32	to	to	ADP
fuelectenerg-384	28	33	the	the	DET
fuelectenerg-384	28	34	study	study	NOUN
fuelectenerg-384	28	35	,	,	PUNCT
fuelectenerg-384	28	36	understanding	understanding	NOUN
fuelectenerg-384	28	37	and/or	and/or	CCONJ
fuelectenerg-384	28	38	prediction	prediction	NOUN
fuelectenerg-384	28	39	of	of	ADP
fuelectenerg-384	28	40	dielectric	dielectric	ADJ
fuelectenerg-384	28	41	charging	charging	NOUN
fuelectenerg-384	28	42	of	of	ADP
fuelectenerg-384	28	43	mems	mem	NOUN
fuelectenerg-384	28	44	.	.	PUNCT
fuelectenerg-384	29	1	the	the	DET
fuelectenerg-384	29	2	experiments	experiment	NOUN
fuelectenerg-384	29	3	were	be	AUX
fuelectenerg-384	29	4	performed	perform	VERB
fuelectenerg-384	29	5	on	on	ADP
fuelectenerg-384	29	6	sinx	sinx	PROPN
fuelectenerg-384	29	7	based	base	VERB
fuelectenerg-384	29	8	mim	mim	PROPN
fuelectenerg-384	29	9	capacitors	capacitor	NOUN
fuelectenerg-384	29	10	and	and	CCONJ
fuelectenerg-384	29	11	mems	mem	VERB
fuelectenerg-384	29	12	capacitive	capacitive	ADJ
fuelectenerg-384	29	13	switches	switch	NOUN
fuelectenerg-384	29	14	fabricated	fabricate	VERB
fuelectenerg-384	29	15	under	under	ADP
fuelectenerg-384	29	16	the	the	DET
fuelectenerg-384	29	17	same	same	ADJ
fuelectenerg-384	29	18	conditions	condition	NOUN
fuelectenerg-384	29	19	.	.	PUNCT
fuelectenerg-384	30	1	2	2	X
fuelectenerg-384	30	2	.	.	X
fuelectenerg-384	30	3	experimental	experimental	ADJ
fuelectenerg-384	30	4	both	both	CCONJ
fuelectenerg-384	30	5	mim	mim	PROPN
fuelectenerg-384	30	6	capacitors	capacitor	NOUN
fuelectenerg-384	30	7	and	and	CCONJ
fuelectenerg-384	30	8	mems	mem	VERB
fuelectenerg-384	30	9	capacitive	capacitive	ADJ
fuelectenerg-384	30	10	switches	switch	NOUN
fuelectenerg-384	30	11	that	that	PRON
fuelectenerg-384	30	12	have	have	AUX
fuelectenerg-384	30	13	been	be	AUX
fuelectenerg-384	30	14	investigated	investigate	VERB
fuelectenerg-384	30	15	in	in	ADP
fuelectenerg-384	30	16	the	the	DET
fuelectenerg-384	30	17	present	present	ADJ
fuelectenerg-384	30	18	work	work	NOUN
fuelectenerg-384	30	19	have	have	AUX
fuelectenerg-384	30	20	been	be	AUX
fuelectenerg-384	30	21	fabricated	fabricate	VERB
fuelectenerg-384	30	22	under	under	ADP
fuelectenerg-384	30	23	the	the	DET
fuelectenerg-384	30	24	same	same	ADJ
fuelectenerg-384	30	25	conditions	condition	NOUN
fuelectenerg-384	30	26	in	in	ADP
fuelectenerg-384	30	27	order	order	NOUN
fuelectenerg-384	30	28	to	to	PART
fuelectenerg-384	30	29	have	have	AUX
fuelectenerg-384	30	30	identical	identical	ADJ
fuelectenerg-384	30	31	dielectric	dielectric	ADJ
fuelectenerg-384	30	32	materials	material	NOUN
fuelectenerg-384	30	33	that	that	PRON
fuelectenerg-384	30	34	allow	allow	VERB
fuelectenerg-384	30	35	the	the	DET
fuelectenerg-384	30	36	extraction	extraction	NOUN
fuelectenerg-384	30	37	of	of	ADP
fuelectenerg-384	30	38	comparative	comparative	ADJ
fuelectenerg-384	30	39	conclusions	conclusion	NOUN
fuelectenerg-384	30	40	.	.	PUNCT
fuelectenerg-384	31	1	standard	standard	ADJ
fuelectenerg-384	31	2	lithography	lithography	NOUN
fuelectenerg-384	31	3	process	process	NOUN
fuelectenerg-384	31	4	on	on	ADP
fuelectenerg-384	31	5	high	high	ADJ
fuelectenerg-384	31	6	resistivity	resistivity	NOUN
fuelectenerg-384	31	7	silicon	silicon	NOUN
fuelectenerg-384	31	8	wafer	wafer	NOUN
fuelectenerg-384	31	9	has	have	AUX
fuelectenerg-384	31	10	been	be	AUX
fuelectenerg-384	31	11	used	use	VERB
fuelectenerg-384	31	12	.	.	PUNCT
fuelectenerg-384	32	1	the	the	DET
fuelectenerg-384	32	2	dielectric	dielectric	ADJ
fuelectenerg-384	32	3	film	film	NOUN
fuelectenerg-384	32	4	is	be	AUX
fuelectenerg-384	32	5	250	250	NUM
fuelectenerg-384	32	6	nm	nm	ADV
fuelectenerg-384	32	7	thick	thick	ADJ
fuelectenerg-384	32	8	sinx	sinx	NOUN
fuelectenerg-384	32	9	deposited	deposit	VERB
fuelectenerg-384	32	10	at	at	ADP
fuelectenerg-384	32	11	300	300	NUM
fuelectenerg-384	32	12	o	o	NOUN
fuelectenerg-384	32	13	c	c	NOUN
fuelectenerg-384	32	14	with	with	ADP
fuelectenerg-384	32	15	the	the	DET
fuelectenerg-384	32	16	pecvd	pecvd	NOUN
fuelectenerg-384	32	17	technique	technique	NOUN
fuelectenerg-384	32	18	.	.	PUNCT
fuelectenerg-384	33	1	the	the	DET
fuelectenerg-384	33	2	same	same	ADJ
fuelectenerg-384	33	3	metal	metal	NOUN
fuelectenerg-384	33	4	electrodes	electrode	NOUN
fuelectenerg-384	33	5	(	(	PUNCT
fuelectenerg-384	33	6	au	au	ADP
fuelectenerg-384	33	7	/	/	SYM
fuelectenerg-384	33	8	ti	ti	NOUN
fuelectenerg-384	33	9	/	/	SYM
fuelectenerg-384	33	10	au	au	ADJ
fuelectenerg-384	33	11	)	)	PUNCT
fuelectenerg-384	33	12	were	be	AUX
fuelectenerg-384	33	13	used	use	VERB
fuelectenerg-384	33	14	in	in	ADP
fuelectenerg-384	33	15	both	both	DET
fuelectenerg-384	33	16	cases	case	NOUN
fuelectenerg-384	33	17	while	while	SCONJ
fuelectenerg-384	33	18	in	in	ADP
fuelectenerg-384	33	19	the	the	DET
fuelectenerg-384	33	20	case	case	NOUN
fuelectenerg-384	33	21	of	of	ADP
fuelectenerg-384	33	22	mems	mem	NOUN
fuelectenerg-384	33	23	the	the	DET
fuelectenerg-384	33	24	2	2	NUM
fuelectenerg-384	33	25	μm	μm	NUM
fuelectenerg-384	33	26	thick	thick	ADJ
fuelectenerg-384	33	27	bridge	bridge	NOUN
fuelectenerg-384	33	28	is	be	AUX
fuelectenerg-384	33	29	suspended	suspend	VERB
fuelectenerg-384	33	30	about	about	ADP
fuelectenerg-384	33	31	2μm	2μm	NOUN
fuelectenerg-384	33	32	above	above	ADP
fuelectenerg-384	33	33	the	the	DET
fuelectenerg-384	33	34	dielectric	dielectric	ADJ
fuelectenerg-384	33	35	material	material	NOUN
fuelectenerg-384	33	36	the	the	DET
fuelectenerg-384	33	37	dc	dc	PROPN
fuelectenerg-384	33	38	and	and	CCONJ
fuelectenerg-384	33	39	transient	transient	VERB
fuelectenerg-384	33	40	current	current	ADJ
fuelectenerg-384	33	41	measurements	measurement	NOUN
fuelectenerg-384	33	42	were	be	AUX
fuelectenerg-384	33	43	recorded	record	VERB
fuelectenerg-384	33	44	with	with	ADP
fuelectenerg-384	33	45	the	the	DET
fuelectenerg-384	33	46	aid	aid	NOUN
fuelectenerg-384	33	47	of	of	ADP
fuelectenerg-384	33	48	a	a	DET
fuelectenerg-384	33	49	keithley	keithley	NOUN
fuelectenerg-384	33	50	k6517a	k6517a	PROPN
fuelectenerg-384	33	51	electrometer	electrometer	NOUN
fuelectenerg-384	33	52	that	that	PRON
fuelectenerg-384	33	53	provided	provide	VERB
fuelectenerg-384	33	54	the	the	DET
fuelectenerg-384	33	55	applied	apply	VERB
fuelectenerg-384	33	56	bias	bias	NOUN
fuelectenerg-384	33	57	and	and	CCONJ
fuelectenerg-384	33	58	measured	measure	VERB
fuelectenerg-384	33	59	the	the	DET
fuelectenerg-384	33	60	current	current	ADJ
fuelectenerg-384	33	61	flow	flow	NOUN
fuelectenerg-384	33	62	through	through	ADP
fuelectenerg-384	33	63	the	the	DET
fuelectenerg-384	33	64	device	device	NOUN
fuelectenerg-384	33	65	.	.	PUNCT
fuelectenerg-384	34	1	the	the	DET
fuelectenerg-384	34	2	capacitance	capacitance	NOUN
fuelectenerg-384	34	3	voltage	voltage	NOUN
fuelectenerg-384	34	4	characteristics	characteristic	NOUN
fuelectenerg-384	34	5	of	of	ADP
fuelectenerg-384	34	6	mems	mem	NOUN
fuelectenerg-384	34	7	switches	switch	NOUN
fuelectenerg-384	34	8	were	be	AUX
fuelectenerg-384	34	9	a	a	DET
fuelectenerg-384	34	10	mim	mim	PROPN
fuelectenerg-384	34	11	capacitor	capacitor	NOUN
fuelectenerg-384	34	12	study	study	NOUN
fuelectenerg-384	34	13	of	of	ADP
fuelectenerg-384	34	14	dielectric	dielectric	ADJ
fuelectenerg-384	34	15	charging	charging	NOUN
fuelectenerg-384	34	16	for	for	ADP
fuelectenerg-384	34	17	rf	rf	VERB
fuelectenerg-384	34	18	mems	mem	NOUN
fuelectenerg-384	34	19	capacitive	capacitive	ADJ
fuelectenerg-384	34	20	switches	switch	NOUN
fuelectenerg-384	34	21	115	115	NUM
fuelectenerg-384	34	22	monitored	monitor	VERB
fuelectenerg-384	34	23	with	with	ADP
fuelectenerg-384	34	24	a	a	DET
fuelectenerg-384	34	25	boonton	boonton	PROPN
fuelectenerg-384	34	26	72b	72b	NOUN
fuelectenerg-384	34	27	capacitance	capacitance	NOUN
fuelectenerg-384	34	28	meter	meter	NOUN
fuelectenerg-384	34	29	.	.	PUNCT
fuelectenerg-384	35	1	all	all	DET
fuelectenerg-384	35	2	measurements	measurement	NOUN
fuelectenerg-384	35	3	were	be	AUX
fuelectenerg-384	35	4	performed	perform	VERB
fuelectenerg-384	35	5	in	in	ADP
fuelectenerg-384	35	6	a	a	DET
fuelectenerg-384	35	7	vacuum	vacuum	NOUN
fuelectenerg-384	35	8	cryostat	cryostat	NOUN
fuelectenerg-384	35	9	after	after	ADP
fuelectenerg-384	35	10	2	2	NUM
fuelectenerg-384	35	11	hours	hour	NOUN
fuelectenerg-384	35	12	annealing	anneal	VERB
fuelectenerg-384	35	13	at	at	ADP
fuelectenerg-384	35	14	140	140	NUM
fuelectenerg-384	35	15	o	o	NOUN
fuelectenerg-384	35	16	c	c	NOUN
fuelectenerg-384	35	17	to	to	PART
fuelectenerg-384	35	18	remove	remove	VERB
fuelectenerg-384	35	19	humidity	humidity	NOUN
fuelectenerg-384	35	20	.	.	PUNCT
fuelectenerg-384	36	1	current	current	ADJ
fuelectenerg-384	36	2	voltage	voltage	NOUN
fuelectenerg-384	36	3	characteristics	characteristic	NOUN
fuelectenerg-384	36	4	,	,	PUNCT
fuelectenerg-384	36	5	the	the	DET
fuelectenerg-384	36	6	charging	charge	VERB
fuelectenerg-384	36	7	current	current	ADJ
fuelectenerg-384	36	8	transient	transient	NOUN
fuelectenerg-384	36	9	technique	technique	NOUN
fuelectenerg-384	36	10	and	and	CCONJ
fuelectenerg-384	36	11	kelvin	kelvin	PROPN
fuelectenerg-384	36	12	probe	probe	NOUN
fuelectenerg-384	36	13	technique	technique	NOUN
fuelectenerg-384	36	14	for	for	ADP
fuelectenerg-384	36	15	the	the	DET
fuelectenerg-384	36	16	assessment	assessment	NOUN
fuelectenerg-384	36	17	of	of	ADP
fuelectenerg-384	36	18	dielectric	dielectric	NOUN
fuelectenerg-384	36	19	were	be	AUX
fuelectenerg-384	36	20	charging	charge	VERB
fuelectenerg-384	36	21	applied	apply	VERB
fuelectenerg-384	36	22	on	on	ADP
fuelectenerg-384	36	23	mim	mim	PROPN
fuelectenerg-384	36	24	capacitors	capacitor	NOUN
fuelectenerg-384	36	25	while	while	SCONJ
fuelectenerg-384	36	26	the	the	DET
fuelectenerg-384	36	27	charging	charging	NOUN
fuelectenerg-384	36	28	and	and	CCONJ
fuelectenerg-384	36	29	discharging	discharge	VERB
fuelectenerg-384	36	30	effects	effect	NOUN
fuelectenerg-384	36	31	in	in	ADP
fuelectenerg-384	36	32	rf	rf	NOUN
fuelectenerg-384	36	33	mems	mem	NOUN
fuelectenerg-384	36	34	capacitive	capacitive	ADJ
fuelectenerg-384	36	35	switches	switch	NOUN
fuelectenerg-384	36	36	were	be	AUX
fuelectenerg-384	36	37	assessed	assess	VERB
fuelectenerg-384	36	38	by	by	ADP
fuelectenerg-384	36	39	monitoring	monitor	VERB
fuelectenerg-384	36	40	the	the	DET
fuelectenerg-384	36	41	shift	shift	NOUN
fuelectenerg-384	36	42	of	of	ADP
fuelectenerg-384	36	43	the	the	DET
fuelectenerg-384	36	44	bias	bias	NOUN
fuelectenerg-384	36	45	for	for	ADP
fuelectenerg-384	36	46	minimum	minimum	NOUN
fuelectenerg-384	36	47	up	up	ADP
fuelectenerg-384	36	48	state	state	NOUN
fuelectenerg-384	36	49	capacitance	capacitance	NOUN
fuelectenerg-384	36	50	.	.	PUNCT
fuelectenerg-384	37	1	the	the	DET
fuelectenerg-384	37	2	latter	latter	ADJ
fuelectenerg-384	37	3	technique	technique	NOUN
fuelectenerg-384	37	4	is	be	AUX
fuelectenerg-384	37	5	the	the	DET
fuelectenerg-384	37	6	equivalent	equivalent	ADJ
fuelectenerg-384	37	7	kelvin	kelvin	PROPN
fuelectenerg-384	37	8	probe	probe	NOUN
fuelectenerg-384	37	9	for	for	ADP
fuelectenerg-384	37	10	mems	mem	NOUN
fuelectenerg-384	37	11	and	and	CCONJ
fuelectenerg-384	37	12	is	be	AUX
fuelectenerg-384	37	13	based	base	VERB
fuelectenerg-384	37	14	on	on	ADP
fuelectenerg-384	37	15	the	the	DET
fuelectenerg-384	37	16	principle	principle	NOUN
fuelectenerg-384	37	17	that	that	SCONJ
fuelectenerg-384	37	18	the	the	DET
fuelectenerg-384	37	19	bias	bias	NOUN
fuelectenerg-384	37	20	at	at	ADP
fuelectenerg-384	37	21	which	which	PRON
fuelectenerg-384	37	22	the	the	DET
fuelectenerg-384	37	23	capacitance	capacitance	NOUN
fuelectenerg-384	37	24	attains	attain	VERB
fuelectenerg-384	37	25	its	its	PRON
fuelectenerg-384	37	26	minimum	minimum	NOUN
fuelectenerg-384	37	27	is	be	AUX
fuelectenerg-384	37	28	the	the	DET
fuelectenerg-384	37	29	one	one	NUM
fuelectenerg-384	37	30	corresponding	corresponding	NOUN
fuelectenerg-384	37	31	to	to	ADP
fuelectenerg-384	37	32	the	the	DET
fuelectenerg-384	37	33	minimum	minimum	ADJ
fuelectenerg-384	37	34	electrostatic	electrostatic	ADJ
fuelectenerg-384	37	35	force	force	NOUN
fuelectenerg-384	37	36	independently	independently	ADV
fuelectenerg-384	37	37	of	of	ADP
fuelectenerg-384	37	38	the	the	DET
fuelectenerg-384	37	39	charge	charge	NOUN
fuelectenerg-384	37	40	uniformity	uniformity	NOUN
fuelectenerg-384	37	41	and	and	CCONJ
fuelectenerg-384	37	42	air	air	NOUN
fuelectenerg-384	37	43	gap	gap	NOUN
fuelectenerg-384	37	44	distribution	distribution	NOUN
fuelectenerg-384	37	45	as	as	ADV
fuelectenerg-384	37	46	well	well	ADV
fuelectenerg-384	37	47	as	as	ADP
fuelectenerg-384	37	48	bridge	bridge	NOUN
fuelectenerg-384	37	49	deformation	deformation	NOUN
fuelectenerg-384	37	50	[	[	X
fuelectenerg-384	37	51	8,20	8,20	NOUN
fuelectenerg-384	37	52	]	]	X
fuelectenerg-384	37	53	.	.	PUNCT
fuelectenerg-384	38	1	3	3	X
fuelectenerg-384	38	2	.	.	NOUN
fuelectenerg-384	38	3	results	result	NOUN
fuelectenerg-384	38	4	and	and	CCONJ
fuelectenerg-384	38	5	discussion	discussion	VERB
fuelectenerg-384	38	6	the	the	DET
fuelectenerg-384	38	7	charging	charging	NOUN
fuelectenerg-384	38	8	and	and	CCONJ
fuelectenerg-384	38	9	discharging	discharge	VERB
fuelectenerg-384	38	10	processes	process	NOUN
fuelectenerg-384	38	11	in	in	ADP
fuelectenerg-384	38	12	mems	mem	NOUN
fuelectenerg-384	38	13	capacitive	capacitive	ADJ
fuelectenerg-384	38	14	switches	switch	NOUN
fuelectenerg-384	38	15	can	can	AUX
fuelectenerg-384	38	16	be	be	AUX
fuelectenerg-384	38	17	expressed	express	VERB
fuelectenerg-384	38	18	briefly	briefly	ADV
fuelectenerg-384	38	19	as	as	ADP
fuelectenerg-384	38	20	following	follow	VERB
fuelectenerg-384	38	21	.	.	PUNCT
fuelectenerg-384	39	1	during	during	ADP
fuelectenerg-384	39	2	the	the	DET
fuelectenerg-384	39	3	device	device	NOUN
fuelectenerg-384	39	4	actuation	actuation	NOUN
fuelectenerg-384	39	5	(	(	PUNCT
fuelectenerg-384	39	6	down	down	ADP
fuelectenerg-384	39	7	state	state	NOUN
fuelectenerg-384	39	8	)	)	PUNCT
fuelectenerg-384	39	9	,	,	PUNCT
fuelectenerg-384	39	10	charges	charge	NOUN
fuelectenerg-384	39	11	are	be	AUX
fuelectenerg-384	39	12	injected	inject	VERB
fuelectenerg-384	39	13	from	from	ADP
fuelectenerg-384	39	14	the	the	DET
fuelectenerg-384	39	15	metal	metal	NOUN
fuelectenerg-384	39	16	bridge	bridge	NOUN
fuelectenerg-384	39	17	under	under	ADP
fuelectenerg-384	39	18	the	the	DET
fuelectenerg-384	39	19	presence	presence	NOUN
fuelectenerg-384	39	20	of	of	ADP
fuelectenerg-384	39	21	an	an	DET
fuelectenerg-384	39	22	electric	electric	ADJ
fuelectenerg-384	39	23	field	field	NOUN
fuelectenerg-384	39	24	,	,	PUNCT
fuelectenerg-384	39	25	usually	usually	ADV
fuelectenerg-384	39	26	in	in	ADP
fuelectenerg-384	39	27	the	the	DET
fuelectenerg-384	39	28	range	range	NOUN
fuelectenerg-384	39	29	of	of	ADP
fuelectenerg-384	39	30	mv	mv	PROPN
fuelectenerg-384	39	31	/	/	SYM
fuelectenerg-384	39	32	cm	cm	NOUN
fuelectenerg-384	39	33	.	.	PUNCT
fuelectenerg-384	40	1	when	when	SCONJ
fuelectenerg-384	40	2	the	the	DET
fuelectenerg-384	40	3	bridge	bridge	NOUN
fuelectenerg-384	40	4	pulls	pull	VERB
fuelectenerg-384	40	5	-	-	PUNCT
fuelectenerg-384	40	6	up	up	ADP
fuelectenerg-384	40	7	,	,	PUNCT
fuelectenerg-384	40	8	these	these	DET
fuelectenerg-384	40	9	stored	store	VERB
fuelectenerg-384	40	10	charges	charge	NOUN
fuelectenerg-384	40	11	are	be	AUX
fuelectenerg-384	40	12	collected	collect	VERB
fuelectenerg-384	40	13	only	only	ADV
fuelectenerg-384	40	14	through	through	ADP
fuelectenerg-384	40	15	the	the	DET
fuelectenerg-384	40	16	bottom	bottom	ADJ
fuelectenerg-384	40	17	electrode	electrode	NOUN
fuelectenerg-384	40	18	.	.	PUNCT
fuelectenerg-384	41	1	this	this	DET
fuelectenerg-384	41	2	process	process	NOUN
fuelectenerg-384	41	3	occurs	occur	VERB
fuelectenerg-384	41	4	under	under	ADP
fuelectenerg-384	41	5	the	the	DET
fuelectenerg-384	41	6	presence	presence	NOUN
fuelectenerg-384	41	7	of	of	ADP
fuelectenerg-384	41	8	a	a	DET
fuelectenerg-384	41	9	low	low	ADJ
fuelectenerg-384	41	10	intrinsic	intrinsic	ADJ
fuelectenerg-384	41	11	field	field	NOUN
fuelectenerg-384	41	12	,	,	PUNCT
fuelectenerg-384	41	13	in	in	ADP
fuelectenerg-384	41	14	the	the	DET
fuelectenerg-384	41	15	range	range	NOUN
fuelectenerg-384	41	16	of	of	ADP
fuelectenerg-384	41	17	a	a	DET
fuelectenerg-384	41	18	few	few	ADJ
fuelectenerg-384	41	19	kv	kv	PROPN
fuelectenerg-384	41	20	/	/	SYM
fuelectenerg-384	41	21	cm	cm	PROPN
fuelectenerg-384	41	22	,	,	PUNCT
fuelectenerg-384	41	23	generated	generate	VERB
fuelectenerg-384	41	24	by	by	ADP
fuelectenerg-384	41	25	the	the	DET
fuelectenerg-384	41	26	injected	inject	VERB
fuelectenerg-384	41	27	charges	charge	NOUN
fuelectenerg-384	41	28	.	.	PUNCT
fuelectenerg-384	42	1	therefore	therefore	ADV
fuelectenerg-384	42	2	,	,	PUNCT
fuelectenerg-384	42	3	in	in	ADP
fuelectenerg-384	42	4	order	order	NOUN
fuelectenerg-384	42	5	to	to	PART
fuelectenerg-384	42	6	asses	asse	VERB
fuelectenerg-384	42	7	the	the	DET
fuelectenerg-384	42	8	issue	issue	NOUN
fuelectenerg-384	42	9	of	of	ADP
fuelectenerg-384	42	10	dielectric	dielectric	ADJ
fuelectenerg-384	42	11	charging	charging	NOUN
fuelectenerg-384	42	12	,	,	PUNCT
fuelectenerg-384	42	13	it	it	PRON
fuelectenerg-384	42	14	is	be	AUX
fuelectenerg-384	42	15	essential	essential	ADJ
fuelectenerg-384	42	16	to	to	PART
fuelectenerg-384	42	17	bear	bear	VERB
fuelectenerg-384	42	18	in	in	ADP
fuelectenerg-384	42	19	mind	mind	NOUN
fuelectenerg-384	42	20	that	that	SCONJ
fuelectenerg-384	42	21	the	the	DET
fuelectenerg-384	42	22	charging	charge	VERB
fuelectenerg-384	42	23	process	process	NOUN
fuelectenerg-384	42	24	is	be	AUX
fuelectenerg-384	42	25	a	a	DET
fuelectenerg-384	42	26	high	high	ADJ
fuelectenerg-384	42	27	field	field	NOUN
fuelectenerg-384	42	28	process	process	NOUN
fuelectenerg-384	42	29	while	while	SCONJ
fuelectenerg-384	42	30	the	the	DET
fuelectenerg-384	42	31	discharging	discharge	VERB
fuelectenerg-384	42	32	one	one	NOUN
fuelectenerg-384	42	33	is	be	AUX
fuelectenerg-384	42	34	a	a	DET
fuelectenerg-384	42	35	low	low	ADJ
fuelectenerg-384	42	36	field	field	NOUN
fuelectenerg-384	42	37	process	process	NOUN
fuelectenerg-384	42	38	that	that	PRON
fuelectenerg-384	42	39	occurs	occur	VERB
fuelectenerg-384	42	40	only	only	ADV
fuelectenerg-384	42	41	through	through	ADP
fuelectenerg-384	42	42	the	the	DET
fuelectenerg-384	42	43	bottom	bottom	ADJ
fuelectenerg-384	42	44	electrode	electrode	NOUN
fuelectenerg-384	42	45	.	.	PUNCT
fuelectenerg-384	43	1	3.1	3.1	NUM
fuelectenerg-384	43	2	.	.	PUNCT
fuelectenerg-384	43	3	conduction	conduction	NOUN
fuelectenerg-384	43	4	mechanism	mechanism	NOUN
fuelectenerg-384	43	5	a	a	DET
fuelectenerg-384	43	6	study	study	NOUN
fuelectenerg-384	43	7	of	of	ADP
fuelectenerg-384	43	8	the	the	DET
fuelectenerg-384	43	9	dc	dc	PROPN
fuelectenerg-384	43	10	characteristics	characteristic	NOUN
fuelectenerg-384	43	11	in	in	ADP
fuelectenerg-384	43	12	mim	mim	PROPN
fuelectenerg-384	43	13	capacitors	capacitor	NOUN
fuelectenerg-384	43	14	could	could	AUX
fuelectenerg-384	43	15	provide	provide	VERB
fuelectenerg-384	43	16	information	information	NOUN
fuelectenerg-384	43	17	on	on	ADP
fuelectenerg-384	43	18	the	the	DET
fuelectenerg-384	43	19	corresponding	corresponding	ADJ
fuelectenerg-384	43	20	conduction	conduction	NOUN
fuelectenerg-384	43	21	mechanism	mechanism	NOUN
fuelectenerg-384	43	22	under	under	ADP
fuelectenerg-384	43	23	high	high	ADJ
fuelectenerg-384	43	24	and	and	CCONJ
fuelectenerg-384	43	25	low	low	ADJ
fuelectenerg-384	43	26	field	field	NOUN
fuelectenerg-384	43	27	,	,	PUNCT
fuelectenerg-384	43	28	thus	thus	ADV
fuelectenerg-384	43	29	during	during	ADP
fuelectenerg-384	43	30	charging	charge	VERB
fuelectenerg-384	43	31	and	and	CCONJ
fuelectenerg-384	43	32	discharging	discharge	VERB
fuelectenerg-384	43	33	process	process	NOUN
fuelectenerg-384	43	34	respectively	respectively	ADV
fuelectenerg-384	43	35	.	.	PUNCT
fuelectenerg-384	44	1	during	during	ADP
fuelectenerg-384	44	2	the	the	DET
fuelectenerg-384	44	3	charging	charge	VERB
fuelectenerg-384	44	4	process	process	NOUN
fuelectenerg-384	44	5	charges	charge	NOUN
fuelectenerg-384	44	6	are	be	AUX
fuelectenerg-384	44	7	injected	inject	VERB
fuelectenerg-384	44	8	from	from	ADP
fuelectenerg-384	44	9	the	the	DET
fuelectenerg-384	44	10	metal	metal	NOUN
fuelectenerg-384	44	11	bridge	bridge	NOUN
fuelectenerg-384	44	12	into	into	ADP
fuelectenerg-384	44	13	the	the	DET
fuelectenerg-384	44	14	insulating	insulate	VERB
fuelectenerg-384	44	15	film	film	NOUN
fuelectenerg-384	44	16	with	with	ADP
fuelectenerg-384	44	17	trap	trap	NOUN
fuelectenerg-384	44	18	assisted	assist	VERB
fuelectenerg-384	44	19	tunneling	tunneling	NOUN
fuelectenerg-384	44	20	(	(	PUNCT
fuelectenerg-384	44	21	tat	tat	NOUN
fuelectenerg-384	44	22	)	)	PUNCT
fuelectenerg-384	44	23	.	.	PUNCT
fuelectenerg-384	45	1	these	these	DET
fuelectenerg-384	45	2	injected	inject	VERB
fuelectenerg-384	45	3	charges	charge	NOUN
fuelectenerg-384	45	4	are	be	AUX
fuelectenerg-384	45	5	redistributed	redistribute	VERB
fuelectenerg-384	45	6	under	under	ADP
fuelectenerg-384	45	7	the	the	DET
fuelectenerg-384	45	8	presence	presence	NOUN
fuelectenerg-384	45	9	of	of	ADP
fuelectenerg-384	45	10	the	the	DET
fuelectenerg-384	45	11	high	high	ADJ
fuelectenerg-384	45	12	field	field	NOUN
fuelectenerg-384	45	13	.	.	PUNCT
fuelectenerg-384	46	1	a	a	DET
fuelectenerg-384	46	2	commonly	commonly	ADV
fuelectenerg-384	46	3	observed	observe	VERB
fuelectenerg-384	46	4	high	high	ADJ
fuelectenerg-384	46	5	field	field	NOUN
fuelectenerg-384	46	6	process	process	NOUN
fuelectenerg-384	46	7	in	in	ADP
fuelectenerg-384	46	8	dielectric	dielectric	ADJ
fuelectenerg-384	46	9	films	film	NOUN
fuelectenerg-384	46	10	is	be	AUX
fuelectenerg-384	46	11	poole	poole	ADJ
fuelectenerg-384	46	12	frenkel	frenkel	NOUN
fuelectenerg-384	46	13	conductivity	conductivity	NOUN
fuelectenerg-384	46	14	[	[	X
fuelectenerg-384	46	15	21,22	21,22	NOUN
fuelectenerg-384	46	16	]	]	X
fuelectenerg-384	46	17	.	.	PUNCT
fuelectenerg-384	47	1	in	in	ADP
fuelectenerg-384	47	2	this	this	DET
fuelectenerg-384	47	3	case	case	NOUN
fuelectenerg-384	47	4	the	the	DET
fuelectenerg-384	47	5	current	current	ADJ
fuelectenerg-384	47	6	density	density	NOUN
fuelectenerg-384	47	7	(	(	PUNCT
fuelectenerg-384	47	8	j	j	NOUN
fuelectenerg-384	47	9	)	)	PUNCT
fuelectenerg-384	47	10	as	as	ADP
fuelectenerg-384	47	11	a	a	DET
fuelectenerg-384	47	12	function	function	NOUN
fuelectenerg-384	47	13	of	of	ADP
fuelectenerg-384	47	14	the	the	DET
fuelectenerg-384	47	15	applied	apply	VERB
fuelectenerg-384	47	16	field	field	NOUN
fuelectenerg-384	47	17	(	(	PUNCT
fuelectenerg-384	47	18	e	e	NOUN
fuelectenerg-384	47	19	)	)	PUNCT
fuelectenerg-384	47	20	is	be	AUX
fuelectenerg-384	47	21	expressed	express	VERB
fuelectenerg-384	47	22	as	as	ADP
fuelectenerg-384	48	1	exp	exp	NOUN
fuelectenerg-384	48	2	b	b	PROPN
fuelectenerg-384	48	3	b	b	PROPN
fuelectenerg-384	48	4	e	e	PROPN
fuelectenerg-384	48	5	j	j	PROPN
fuelectenerg-384	48	6	ae	ae	PROPN
fuelectenerg-384	48	7	kt	kt	PROPN
fuelectenerg-384	48	8			PROPN
fuelectenerg-384	48	9			NOUN
fuelectenerg-384	48	10			NOUN
fuelectenerg-384	48	11			ADP
fuelectenerg-384	48	12			PROPN
fuelectenerg-384	48	13			PROPN
fuelectenerg-384	48	14			NOUN
fuelectenerg-384	48	15			PROPN
fuelectenerg-384	48	16			PROPN
fuelectenerg-384	48	17	(	(	PUNCT
fuelectenerg-384	48	18	1	1	NUM
fuelectenerg-384	48	19	)	)	PUNCT
fuelectenerg-384	48	20	where	where	SCONJ
fuelectenerg-384	48	21	a	a	DET
fuelectenerg-384	48	22	,	,	PUNCT
fuelectenerg-384	48	23	b	b	NOUN
fuelectenerg-384	48	24	are	be	AUX
fuelectenerg-384	48	25	constants	constant	NOUN
fuelectenerg-384	48	26	and	and	CCONJ
fuelectenerg-384	48	27	φb	φb	NOUN
fuelectenerg-384	48	28	is	be	AUX
fuelectenerg-384	48	29	the	the	DET
fuelectenerg-384	48	30	energy	energy	NOUN
fuelectenerg-384	48	31	barrier	barrier	NOUN
fuelectenerg-384	48	32	for	for	ADP
fuelectenerg-384	48	33	process	process	NOUN
fuelectenerg-384	48	34	associated	associate	VERB
fuelectenerg-384	48	35	to	to	ADP
fuelectenerg-384	48	36	the	the	DET
fuelectenerg-384	48	37	defects	defect	NOUN
fuelectenerg-384	48	38	characteristics	characteristic	NOUN
fuelectenerg-384	48	39	and	and	CCONJ
fuelectenerg-384	48	40	k	k	PROPN
fuelectenerg-384	48	41	is	be	AUX
fuelectenerg-384	48	42	the	the	DET
fuelectenerg-384	48	43	boltzmann	boltzmann	PROPN
fuelectenerg-384	48	44	constant	constant	PROPN
fuelectenerg-384	48	45	.	.	PUNCT
fuelectenerg-384	49	1	the	the	DET
fuelectenerg-384	49	2	straight	straight	ADJ
fuelectenerg-384	49	3	line	line	NOUN
fuelectenerg-384	49	4	obtained	obtain	VERB
fuelectenerg-384	49	5	for	for	ADP
fuelectenerg-384	49	6	the	the	DET
fuelectenerg-384	49	7	high	high	ADJ
fuelectenerg-384	49	8	field	field	NOUN
fuelectenerg-384	49	9	regime	regime	NOUN
fuelectenerg-384	49	10	in	in	ADP
fuelectenerg-384	49	11	poole	poole	ADJ
fuelectenerg-384	49	12	-	-	PUNCT
fuelectenerg-384	49	13	frenkel	frenkel	NOUN
fuelectenerg-384	49	14	plot	plot	NOUN
fuelectenerg-384	49	15	presented	present	VERB
fuelectenerg-384	49	16	in	in	ADP
fuelectenerg-384	49	17	fig	fig	NOUN
fuelectenerg-384	49	18	.	.	PUNCT
fuelectenerg-384	50	1	1	1	NUM
fuelectenerg-384	50	2	is	be	AUX
fuelectenerg-384	50	3	a	a	DET
fuelectenerg-384	50	4	signature	signature	NOUN
fuelectenerg-384	50	5	for	for	ADP
fuelectenerg-384	50	6	the	the	DET
fuelectenerg-384	50	7	mechanism	mechanism	NOUN
fuelectenerg-384	50	8	confirming	confirm	VERB
fuelectenerg-384	50	9	that	that	SCONJ
fuelectenerg-384	50	10	the	the	DET
fuelectenerg-384	50	11	conduction	conduction	NOUN
fuelectenerg-384	50	12	mechanism	mechanism	NOUN
fuelectenerg-384	50	13	responsible	responsible	ADJ
fuelectenerg-384	50	14	for	for	ADP
fuelectenerg-384	50	15	the	the	DET
fuelectenerg-384	50	16	charge	charge	NOUN
fuelectenerg-384	50	17	redistribution	redistribution	NOUN
fuelectenerg-384	50	18	during	during	ADP
fuelectenerg-384	50	19	charging	charge	VERB
fuelectenerg-384	50	20	is	be	AUX
fuelectenerg-384	50	21	poole	poole	ADJ
fuelectenerg-384	50	22	frenkel	frenkel	NOUN
fuelectenerg-384	50	23	.	.	PUNCT
fuelectenerg-384	51	1	for	for	ADP
fuelectenerg-384	51	2	the	the	DET
fuelectenerg-384	51	3	applied	apply	VERB
fuelectenerg-384	51	4	fields	field	NOUN
fuelectenerg-384	51	5	intensities	intensity	NOUN
fuelectenerg-384	51	6	below	below	ADP
fuelectenerg-384	51	7	500	500	NUM
fuelectenerg-384	51	8	kv	kv	NOUN
fuelectenerg-384	51	9	/	/	SYM
fuelectenerg-384	51	10	cm	cm	NOUN
fuelectenerg-384	51	11	which	which	PRON
fuelectenerg-384	51	12	correspond	correspond	VERB
fuelectenerg-384	51	13	to	to	ADP
fuelectenerg-384	51	14	the	the	DET
fuelectenerg-384	51	15	data	datum	NOUN
fuelectenerg-384	51	16	out	out	ADP
fuelectenerg-384	51	17	of	of	ADP
fuelectenerg-384	51	18	the	the	DET
fuelectenerg-384	51	19	fitting	fitting	ADJ
fuelectenerg-384	51	20	curve	curve	NOUN
fuelectenerg-384	51	21	,	,	PUNCT
fuelectenerg-384	51	22	the	the	DET
fuelectenerg-384	51	23	poole	poole	ADJ
fuelectenerg-384	51	24	frenkel	frenkel	NOUN
fuelectenerg-384	51	25	mechanism	mechanism	NOUN
fuelectenerg-384	51	26	is	be	AUX
fuelectenerg-384	51	27	no	no	ADV
fuelectenerg-384	51	28	longer	long	ADV
fuelectenerg-384	51	29	valid	valid	ADJ
fuelectenerg-384	51	30	to	to	PART
fuelectenerg-384	51	31	describe	describe	VERB
fuelectenerg-384	51	32	the	the	DET
fuelectenerg-384	51	33	conductivity	conductivity	NOUN
fuelectenerg-384	51	34	of	of	ADP
fuelectenerg-384	51	35	the	the	DET
fuelectenerg-384	51	36	films	film	NOUN
fuelectenerg-384	51	37	.	.	PUNCT
fuelectenerg-384	52	1	116	116	NUM
fuelectenerg-384	52	2	l.	l.	PROPN
fuelectenerg-384	52	3	michalas	michalas	PROPN
fuelectenerg-384	52	4	,	,	PUNCT
fuelectenerg-384	52	5	m.	m.	PROPN
fuelectenerg-384	52	6	koutsoureli	koutsoureli	PROPN
fuelectenerg-384	52	7	,	,	PUNCT
fuelectenerg-384	52	8	e.	e.	PROPN
fuelectenerg-384	52	9	papandreou	papandreou	PROPN
fuelectenerg-384	52	10	,	,	PUNCT
fuelectenerg-384	52	11	a.	a.	PROPN
fuelectenerg-384	52	12	gantis	gantis	PROPN
fuelectenerg-384	52	13	,	,	PUNCT
fuelectenerg-384	52	14	g.	g.	PROPN
fuelectenerg-384	52	15	papaioannou	papaioannou	PROPN
fuelectenerg-384	52	16	fig	fig	PROPN
fuelectenerg-384	52	17	.	.	PUNCT
fuelectenerg-384	53	1	1	1	NUM
fuelectenerg-384	53	2	poole	poole	ADJ
fuelectenerg-384	53	3	frenkel	frenkel	NOUN
fuelectenerg-384	53	4	signature	signature	NOUN
fuelectenerg-384	53	5	plot	plot	NOUN
fuelectenerg-384	53	6	for	for	ADP
fuelectenerg-384	53	7	high	high	ADJ
fuelectenerg-384	53	8	field	field	NOUN
fuelectenerg-384	53	9	conductivity	conductivity	NOUN
fuelectenerg-384	53	10	fig	fig	NOUN
fuelectenerg-384	53	11	.	.	PUNCT
fuelectenerg-384	54	1	2	2	NUM
fuelectenerg-384	54	2	non	non	NOUN
fuelectenerg-384	54	3	linear	linear	PROPN
fuelectenerg-384	54	4	fitting	fit	VERB
fuelectenerg-384	54	5	with	with	ADP
fuelectenerg-384	54	6	eq.2	eq.2	NOUN
fuelectenerg-384	54	7	on	on	ADP
fuelectenerg-384	54	8	low	low	ADJ
fuelectenerg-384	54	9	field	field	NOUN
fuelectenerg-384	54	10	experimental	experimental	ADJ
fuelectenerg-384	54	11	data	datum	NOUN
fuelectenerg-384	54	12	confirms	confirm	VERB
fuelectenerg-384	54	13	hopping	hop	VERB
fuelectenerg-384	54	14	conductivity	conductivity	NOUN
fuelectenerg-384	54	15	as	as	ADP
fuelectenerg-384	54	16	corresponding	corresponding	ADJ
fuelectenerg-384	54	17	mechanism	mechanism	NOUN
fuelectenerg-384	54	18	therefore	therefore	ADV
fuelectenerg-384	54	19	,	,	PUNCT
fuelectenerg-384	54	20	a	a	DET
fuelectenerg-384	54	21	different	different	ADJ
fuelectenerg-384	54	22	mechanism	mechanism	NOUN
fuelectenerg-384	54	23	is	be	AUX
fuelectenerg-384	54	24	expected	expect	VERB
fuelectenerg-384	54	25	to	to	PART
fuelectenerg-384	54	26	dominate	dominate	VERB
fuelectenerg-384	54	27	in	in	ADP
fuelectenerg-384	54	28	the	the	DET
fuelectenerg-384	54	29	low	low	ADJ
fuelectenerg-384	54	30	field	field	NOUN
fuelectenerg-384	54	31	regime	regime	NOUN
fuelectenerg-384	54	32	that	that	PRON
fuelectenerg-384	54	33	provide	provide	VERB
fuelectenerg-384	54	34	information	information	NOUN
fuelectenerg-384	54	35	on	on	ADP
fuelectenerg-384	54	36	the	the	DET
fuelectenerg-384	54	37	conduction	conduction	NOUN
fuelectenerg-384	54	38	mechanism	mechanism	NOUN
fuelectenerg-384	54	39	for	for	ADP
fuelectenerg-384	54	40	the	the	DET
fuelectenerg-384	54	41	applied	apply	VERB
fuelectenerg-384	54	42	fields	field	NOUN
fuelectenerg-384	54	43	below	below	ADP
fuelectenerg-384	54	44	500	500	NUM
fuelectenerg-384	54	45	kv	kv	NOUN
fuelectenerg-384	54	46	/	/	SYM
fuelectenerg-384	54	47	cm	cm	PROPN
fuelectenerg-384	54	48	,	,	PUNCT
fuelectenerg-384	54	49	thus	thus	ADV
fuelectenerg-384	54	50	during	during	ADP
fuelectenerg-384	54	51	the	the	DET
fuelectenerg-384	54	52	discharging	discharge	VERB
fuelectenerg-384	54	53	process	process	NOUN
fuelectenerg-384	54	54	.	.	PUNCT
fuelectenerg-384	55	1	fig	fig	NOUN
fuelectenerg-384	55	2	.	.	PUNCT
fuelectenerg-384	56	1	2	2	NUM
fuelectenerg-384	56	2	presents	present	VERB
fuelectenerg-384	56	3	a	a	DET
fuelectenerg-384	56	4	fitting	fitting	NOUN
fuelectenerg-384	56	5	of	of	ADP
fuelectenerg-384	56	6	eq	eq	NOUN
fuelectenerg-384	56	7	.	.	PROPN
fuelectenerg-384	56	8	2	2	NUM
fuelectenerg-384	56	9	on	on	ADP
fuelectenerg-384	56	10	the	the	DET
fuelectenerg-384	56	11	experimental	experimental	ADJ
fuelectenerg-384	56	12	data	datum	NOUN
fuelectenerg-384	56	13	.	.	PUNCT
fuelectenerg-384	57	1	in	in	ADP
fuelectenerg-384	57	2	the	the	DET
fuelectenerg-384	57	3	low	low	ADJ
fuelectenerg-384	57	4	field	field	NOUN
fuelectenerg-384	57	5	regime	regime	NOUN
fuelectenerg-384	57	6	charge	charge	NOUN
fuelectenerg-384	57	7	transport	transport	NOUN
fuelectenerg-384	57	8	arise	arise	NOUN
fuelectenerg-384	57	9	by	by	ADP
fuelectenerg-384	57	10	hopping	hop	VERB
fuelectenerg-384	57	11	described	describe	VERB
fuelectenerg-384	57	12	by	by	ADP
fuelectenerg-384	57	13	eq.2	eq.2	PROPN
fuelectenerg-384	57	14	,	,	PUNCT
fuelectenerg-384	57	15	where	where	SCONJ
fuelectenerg-384	57	16	α	α	NOUN
fuelectenerg-384	57	17	is	be	AUX
fuelectenerg-384	57	18	a	a	DET
fuelectenerg-384	57	19	constant	constant	ADJ
fuelectenerg-384	57	20	related	relate	VERB
fuelectenerg-384	57	21	to	to	ADP
fuelectenerg-384	57	22	material	material	ADJ
fuelectenerg-384	57	23	microstructure	microstructure	NOUN
fuelectenerg-384	57	24	.	.	PUNCT
fuelectenerg-384	58	1	exp	exp	NOUN
fuelectenerg-384	58	2	[	[	X
fuelectenerg-384	58	3	]	]	X
fuelectenerg-384	58	4	j	j	PROPN
fuelectenerg-384	58	5	ae	ae	PROPN
fuelectenerg-384	58	6			PROPN
fuelectenerg-384	58	7	(	(	PUNCT
fuelectenerg-384	58	8	2	2	NUM
fuelectenerg-384	58	9	)	)	PUNCT
fuelectenerg-384	58	10	3.2	3.2	NUM
fuelectenerg-384	58	11	.	.	PUNCT
fuelectenerg-384	59	1	the	the	DET
fuelectenerg-384	59	2	charging	charging	NOUN
fuelectenerg-384	59	3	process	process	NOUN
fuelectenerg-384	59	4	the	the	DET
fuelectenerg-384	59	5	charging	charge	VERB
fuelectenerg-384	59	6	process	process	NOUN
fuelectenerg-384	59	7	was	be	AUX
fuelectenerg-384	59	8	investigated	investigate	VERB
fuelectenerg-384	59	9	in	in	ADP
fuelectenerg-384	59	10	both	both	PRON
fuelectenerg-384	59	11	mim	mim	PROPN
fuelectenerg-384	59	12	capacitors	capacitor	NOUN
fuelectenerg-384	59	13	and	and	CCONJ
fuelectenerg-384	59	14	mems	mem	VERB
fuelectenerg-384	59	15	capacitive	capacitive	ADJ
fuelectenerg-384	59	16	switches	switch	NOUN
fuelectenerg-384	59	17	in	in	ADP
fuelectenerg-384	59	18	order	order	NOUN
fuelectenerg-384	59	19	to	to	PART
fuelectenerg-384	59	20	extract	extract	VERB
fuelectenerg-384	59	21	comparative	comparative	ADJ
fuelectenerg-384	59	22	information	information	NOUN
fuelectenerg-384	59	23	.	.	PUNCT
fuelectenerg-384	60	1	in	in	ADP
fuelectenerg-384	60	2	case	case	NOUN
fuelectenerg-384	60	3	of	of	ADP
fuelectenerg-384	60	4	mim	mim	PROPN
fuelectenerg-384	60	5	capacitors	capacitor	NOUN
fuelectenerg-384	60	6	the	the	DET
fuelectenerg-384	60	7	charging	charge	VERB
fuelectenerg-384	60	8	process	process	NOUN
fuelectenerg-384	60	9	was	be	AUX
fuelectenerg-384	60	10	investigated	investigate	VERB
fuelectenerg-384	60	11	with	with	ADP
fuelectenerg-384	60	12	the	the	DET
fuelectenerg-384	60	13	aid	aid	NOUN
fuelectenerg-384	60	14	of	of	ADP
fuelectenerg-384	60	15	charging	charge	VERB
fuelectenerg-384	60	16	current	current	ADJ
fuelectenerg-384	60	17	transient	transient	NOUN
fuelectenerg-384	60	18	technique	technique	NOUN
fuelectenerg-384	60	19	(	(	PUNCT
fuelectenerg-384	60	20	cct	cct	NOUN
fuelectenerg-384	60	21	)	)	PUNCT
fuelectenerg-384	60	22	.	.	PUNCT
fuelectenerg-384	61	1	the	the	DET
fuelectenerg-384	61	2	density	density	NOUN
fuelectenerg-384	61	3	of	of	ADP
fuelectenerg-384	61	4	charge	charge	NOUN
fuelectenerg-384	61	5	injected	inject	VERB
fuelectenerg-384	61	6	and	and	CCONJ
fuelectenerg-384	61	7	stored	store	VERB
fuelectenerg-384	61	8	into	into	ADP
fuelectenerg-384	61	9	the	the	DET
fuelectenerg-384	61	10	dielectric	dielectric	ADJ
fuelectenerg-384	61	11	film	film	NOUN
fuelectenerg-384	61	12	upon	upon	SCONJ
fuelectenerg-384	61	13	the	the	DET
fuelectenerg-384	61	14	application	application	NOUN
fuelectenerg-384	61	15	of	of	ADP
fuelectenerg-384	61	16	a	a	DET
fuelectenerg-384	61	17	specific	specific	ADJ
fuelectenerg-384	61	18	applied	apply	VERB
fuelectenerg-384	61	19	field	field	NOUN
fuelectenerg-384	61	20	as	as	SCONJ
fuelectenerg-384	61	21	a	a	DET
fuelectenerg-384	61	22	function	function	NOUN
fuelectenerg-384	61	23	of	of	ADP
fuelectenerg-384	61	24	charging	charge	VERB
fuelectenerg-384	61	25	time	time	NOUN
fuelectenerg-384	61	26	is	be	AUX
fuelectenerg-384	61	27	estimated	estimate	VERB
fuelectenerg-384	61	28	by	by	ADP
fuelectenerg-384	61	29	monitoring	monitor	VERB
fuelectenerg-384	61	30	the	the	DET
fuelectenerg-384	61	31	current	current	ADJ
fuelectenerg-384	61	32	decay	decay	NOUN
fuelectenerg-384	61	33	.	.	PUNCT
fuelectenerg-384	62	1	the	the	DET
fuelectenerg-384	62	2	total	total	ADJ
fuelectenerg-384	62	3	measured	measure	VERB
fuelectenerg-384	62	4	current	current	NOUN
fuelectenerg-384	62	5	through	through	ADP
fuelectenerg-384	62	6	the	the	DET
fuelectenerg-384	62	7	device	device	NOUN
fuelectenerg-384	62	8	is	be	AUX
fuelectenerg-384	62	9	the	the	DET
fuelectenerg-384	62	10	sum	sum	NOUN
fuelectenerg-384	62	11	of	of	ADP
fuelectenerg-384	62	12	the	the	DET
fuelectenerg-384	62	13	dielectric	dielectric	ADJ
fuelectenerg-384	62	14	relaxation	relaxation	NOUN
fuelectenerg-384	62	15	current	current	ADJ
fuelectenerg-384	62	16	and	and	CCONJ
fuelectenerg-384	62	17	the	the	DET
fuelectenerg-384	62	18	steady	steady	ADJ
fuelectenerg-384	62	19	state	state	NOUN
fuelectenerg-384	62	20	leakage	leakage	NOUN
fuelectenerg-384	62	21	current	current	NOUN
fuelectenerg-384	62	22	of	of	ADP
fuelectenerg-384	62	23	the	the	DET
fuelectenerg-384	62	24	dielectric	dielectric	ADJ
fuelectenerg-384	62	25	film	film	NOUN
fuelectenerg-384	62	26	(	(	PUNCT
fuelectenerg-384	62	27	)	)	PUNCT
fuelectenerg-384	62	28	(	(	PUNCT
fuelectenerg-384	62	29	)	)	PUNCT
fuelectenerg-384	62	30	total	total	NOUN
fuelectenerg-384	62	31	relax	relax	VERB
fuelectenerg-384	62	32	leakj	leakj	PROPN
fuelectenerg-384	62	33	t	t	PROPN
fuelectenerg-384	62	34	j	j	PROPN
fuelectenerg-384	62	35	t	t	PROPN
fuelectenerg-384	62	36	j	j	PROPN
fuelectenerg-384	62	37			PROPN
fuelectenerg-384	62	38	(	(	PUNCT
fuelectenerg-384	62	39	3	3	X
fuelectenerg-384	62	40	)	)	PUNCT
fuelectenerg-384	62	41	a	a	DET
fuelectenerg-384	62	42	typical	typical	ADJ
fuelectenerg-384	62	43	charging	charge	VERB
fuelectenerg-384	62	44	transient	transient	NOUN
fuelectenerg-384	62	45	δj(t	δj(t	PUNCT
fuelectenerg-384	62	46	)	)	PUNCT
fuelectenerg-384	62	47	=	=	SYM
fuelectenerg-384	62	48	jtotal(t	jtotal(t	NOUN
fuelectenerg-384	62	49	)	)	PUNCT
fuelectenerg-384	62	50			NOUN
fuelectenerg-384	62	51	jleak	jleak	NOUN
fuelectenerg-384	62	52	,	,	PUNCT
fuelectenerg-384	62	53	is	be	AUX
fuelectenerg-384	62	54	presented	present	VERB
fuelectenerg-384	62	55	in	in	ADP
fuelectenerg-384	62	56	fig	fig	NOUN
fuelectenerg-384	62	57	.	.	PUNCT
fuelectenerg-384	63	1	3	3	X
fuelectenerg-384	63	2	.	.	X
fuelectenerg-384	64	1	the	the	DET
fuelectenerg-384	64	2	stored	store	VERB
fuelectenerg-384	64	3	charge	charge	NOUN
fuelectenerg-384	64	4	is	be	AUX
fuelectenerg-384	64	5	then	then	ADV
fuelectenerg-384	64	6	calculated	calculate	VERB
fuelectenerg-384	64	7	by	by	ADP
fuelectenerg-384	64	8	the	the	DET
fuelectenerg-384	64	9	following	follow	VERB
fuelectenerg-384	64	10	integral	integral	ADJ
fuelectenerg-384	64	11	.	.	PUNCT
fuelectenerg-384	65	1	(	(	PUNCT
fuelectenerg-384	65	2	)	)	PUNCT
fuelectenerg-384	65	3	t	t	NOUN
fuelectenerg-384	65	4	o	o	X
fuelectenerg-384	65	5	j	j	PROPN
fuelectenerg-384	65	6	t	t	PROPN
fuelectenerg-384	65	7	dt	dt	PROPN
fuelectenerg-384	65	8			PROPN
fuelectenerg-384	65	9			PROPN
fuelectenerg-384	65	10	(	(	PUNCT
fuelectenerg-384	65	11	4	4	NUM
fuelectenerg-384	65	12	)	)	PUNCT
fuelectenerg-384	65	13	by	by	ADP
fuelectenerg-384	65	14	varying	vary	VERB
fuelectenerg-384	65	15	the	the	DET
fuelectenerg-384	65	16	upper	upper	ADJ
fuelectenerg-384	65	17	integration	integration	NOUN
fuelectenerg-384	65	18	limit	limit	NOUN
fuelectenerg-384	65	19	it	it	PRON
fuelectenerg-384	65	20	is	be	AUX
fuelectenerg-384	65	21	possible	possible	ADJ
fuelectenerg-384	65	22	to	to	PART
fuelectenerg-384	65	23	calculate	calculate	VERB
fuelectenerg-384	65	24	the	the	DET
fuelectenerg-384	65	25	stored	store	VERB
fuelectenerg-384	65	26	charge	charge	NOUN
fuelectenerg-384	65	27	in	in	ADP
fuelectenerg-384	65	28	the	the	DET
fuelectenerg-384	65	29	dielectric	dielectric	ADJ
fuelectenerg-384	65	30	film	film	NOUN
fuelectenerg-384	65	31	as	as	ADP
fuelectenerg-384	65	32	a	a	DET
fuelectenerg-384	65	33	function	function	NOUN
fuelectenerg-384	65	34	of	of	ADP
fuelectenerg-384	65	35	stressing	stress	VERB
fuelectenerg-384	65	36	time	time	NOUN
fuelectenerg-384	65	37	for	for	ADP
fuelectenerg-384	65	38	a	a	DET
fuelectenerg-384	65	39	specific	specific	ADJ
fuelectenerg-384	65	40	applied	apply	VERB
fuelectenerg-384	65	41	field	field	NOUN
fuelectenerg-384	65	42	.	.	PUNCT
fuelectenerg-384	66	1	in	in	ADP
fuelectenerg-384	66	2	case	case	NOUN
fuelectenerg-384	66	3	of	of	ADP
fuelectenerg-384	66	4	1mv	1mv	ADJ
fuelectenerg-384	66	5	/	/	SYM
fuelectenerg-384	66	6	cm	cm	NOUN
fuelectenerg-384	66	7	,	,	PUNCT
fuelectenerg-384	66	8	which	which	PRON
fuelectenerg-384	66	9	corresponds	correspond	VERB
fuelectenerg-384	66	10	to	to	ADP
fuelectenerg-384	66	11	the	the	DET
fuelectenerg-384	66	12	same	same	ADJ
fuelectenerg-384	66	13	condition	condition	NOUN
fuelectenerg-384	66	14	applied	apply	VERB
fuelectenerg-384	66	15	to	to	ADP
fuelectenerg-384	66	16	mems	mem	NOUN
fuelectenerg-384	66	17	switches	switch	NOUN
fuelectenerg-384	66	18	,	,	PUNCT
fuelectenerg-384	66	19	the	the	DET
fuelectenerg-384	66	20	stored	store	VERB
fuelectenerg-384	66	21	charge	charge	NOUN
fuelectenerg-384	66	22	is	be	AUX
fuelectenerg-384	66	23	presented	present	VERB
fuelectenerg-384	66	24	in	in	ADP
fuelectenerg-384	66	25	fig	fig	NOUN
fuelectenerg-384	66	26	.	.	PUNCT
fuelectenerg-384	67	1	4	4	X
fuelectenerg-384	67	2	.	.	X
fuelectenerg-384	67	3	a	a	DET
fuelectenerg-384	67	4	mim	mim	PROPN
fuelectenerg-384	67	5	capacitor	capacitor	NOUN
fuelectenerg-384	67	6	study	study	NOUN
fuelectenerg-384	67	7	of	of	ADP
fuelectenerg-384	67	8	dielectric	dielectric	ADJ
fuelectenerg-384	67	9	charging	charging	NOUN
fuelectenerg-384	67	10	for	for	ADP
fuelectenerg-384	67	11	rf	rf	VERB
fuelectenerg-384	67	12	mems	mem	NOUN
fuelectenerg-384	67	13	capacitive	capacitive	ADJ
fuelectenerg-384	67	14	switches	switch	NOUN
fuelectenerg-384	67	15	117	117	NUM
fuelectenerg-384	67	16	fig	fig	NOUN
fuelectenerg-384	67	17	.	.	PUNCT
fuelectenerg-384	68	1	3	3	NUM
fuelectenerg-384	68	2	charging	charge	VERB
fuelectenerg-384	68	3	transient	transient	NOUN
fuelectenerg-384	68	4	.	.	PUNCT
fuelectenerg-384	69	1	the	the	DET
fuelectenerg-384	69	2	ti	ti	PROPN
fuelectenerg-384	69	3	denotes	denote	VERB
fuelectenerg-384	69	4	the	the	DET
fuelectenerg-384	69	5	different	different	ADJ
fuelectenerg-384	69	6	integration	integration	NOUN
fuelectenerg-384	69	7	times	time	NOUN
fuelectenerg-384	69	8	for	for	ADP
fuelectenerg-384	69	9	eq	eq	PROPN
fuelectenerg-384	69	10	.	.	PROPN
fuelectenerg-384	69	11	4	4	NUM
fuelectenerg-384	69	12	fig	fig	NOUN
fuelectenerg-384	69	13	.	.	PUNCT
fuelectenerg-384	70	1	4	4	NUM
fuelectenerg-384	70	2	charge	charge	NOUN
fuelectenerg-384	70	3	storage	storage	NOUN
fuelectenerg-384	70	4	in	in	ADP
fuelectenerg-384	70	5	mim	mim	PROPN
fuelectenerg-384	70	6	capacitors	capacitor	NOUN
fuelectenerg-384	70	7	as	as	ADP
fuelectenerg-384	70	8	a	a	DET
fuelectenerg-384	70	9	function	function	NOUN
fuelectenerg-384	70	10	on	on	ADP
fuelectenerg-384	70	11	charging	charge	VERB
fuelectenerg-384	70	12	time	time	NOUN
fuelectenerg-384	70	13	under	under	ADP
fuelectenerg-384	70	14	applied	applied	ADJ
fuelectenerg-384	70	15	field	field	NOUN
fuelectenerg-384	70	16	of	of	ADP
fuelectenerg-384	70	17	1mv	1mv	ADJ
fuelectenerg-384	70	18	/	/	SYM
fuelectenerg-384	70	19	cm	cm	NOUN
fuelectenerg-384	70	20	in	in	ADP
fuelectenerg-384	70	21	mems	mems	PROPN
fuelectenerg-384	70	22	capacitive	capacitive	ADJ
fuelectenerg-384	70	23	switches	switch	NOUN
fuelectenerg-384	70	24	the	the	DET
fuelectenerg-384	70	25	stored	store	VERB
fuelectenerg-384	70	26	charge	charge	NOUN
fuelectenerg-384	70	27	after	after	SCONJ
fuelectenerg-384	70	28	a	a	DET
fuelectenerg-384	70	29	successive	successive	ADJ
fuelectenerg-384	70	30	contacting	contact	VERB
fuelectenerg-384	70	31	stress	stress	NOUN
fuelectenerg-384	70	32	is	be	AUX
fuelectenerg-384	70	33	calculated	calculate	VERB
fuelectenerg-384	70	34	by	by	ADP
fuelectenerg-384	70	35	monitoring	monitor	VERB
fuelectenerg-384	70	36	the	the	DET
fuelectenerg-384	70	37	shift	shift	NOUN
fuelectenerg-384	70	38	in	in	ADP
fuelectenerg-384	70	39	the	the	DET
fuelectenerg-384	70	40	bias	bias	NOUN
fuelectenerg-384	70	41	for	for	ADP
fuelectenerg-384	70	42	minimum	minimum	NOUN
fuelectenerg-384	70	43	up	up	ADP
fuelectenerg-384	70	44	state	state	NOUN
fuelectenerg-384	70	45	capacitance	capacitance	NOUN
fuelectenerg-384	70	46	(	(	PUNCT
fuelectenerg-384	70	47	fig	fig	NOUN
fuelectenerg-384	70	48	.	.	PUNCT
fuelectenerg-384	71	1	5	5	NUM
fuelectenerg-384	71	2	)	)	PUNCT
fuelectenerg-384	72	1	[	[	X
fuelectenerg-384	72	2	23,24	23,24	X
fuelectenerg-384	72	3	]	]	PUNCT
fuelectenerg-384	72	4	as	as	SCONJ
fuelectenerg-384	72	5	presented	present	VERB
fuelectenerg-384	72	6	in	in	ADP
fuelectenerg-384	72	7	details	detail	NOUN
fuelectenerg-384	72	8	in	in	ADP
fuelectenerg-384	72	9	[	[	X
fuelectenerg-384	72	10	20	20	NUM
fuelectenerg-384	72	11	]	]	PUNCT
fuelectenerg-384	72	12	.	.	PUNCT
fuelectenerg-384	73	1	the	the	DET
fuelectenerg-384	73	2	stored	store	VERB
fuelectenerg-384	73	3	charge	charge	NOUN
fuelectenerg-384	73	4	(	(	PUNCT
fuelectenerg-384	73	5	σ	σ	NOUN
fuelectenerg-384	73	6	)	)	PUNCT
fuelectenerg-384	73	7	is	be	AUX
fuelectenerg-384	73	8	then	then	ADV
fuelectenerg-384	73	9	calculated	calculate	VERB
fuelectenerg-384	73	10	as	as	ADP
fuelectenerg-384	73	11	0	0	NUM
fuelectenerg-384	73	12	min	min	NOUN
fuelectenerg-384	73	13	r	r	NOUN
fuelectenerg-384	73	14	v	v	NOUN
fuelectenerg-384	73	15	d	d	NOUN
fuelectenerg-384	73	16			PROPN
fuelectenerg-384	73	17			PROPN
fuelectenerg-384	73	18			PROPN
fuelectenerg-384	73	19			NOUN
fuelectenerg-384	73	20			X
fuelectenerg-384	73	21	(	(	PUNCT
fuelectenerg-384	73	22	5	5	NUM
fuelectenerg-384	73	23	)	)	PUNCT
fuelectenerg-384	73	24	where	where	SCONJ
fuelectenerg-384	73	25	d	d	NOUN
fuelectenerg-384	73	26	is	be	AUX
fuelectenerg-384	73	27	the	the	DET
fuelectenerg-384	73	28	dielectric	dielectric	ADJ
fuelectenerg-384	73	29	film	film	NOUN
fuelectenerg-384	73	30	thickness	thickness	NOUN
fuelectenerg-384	73	31	and	and	CCONJ
fuelectenerg-384	73	32	ε0	ε0	PROPN
fuelectenerg-384	73	33	and	and	CCONJ
fuelectenerg-384	73	34	εr	εr	VERB
fuelectenerg-384	73	35	the	the	DET
fuelectenerg-384	73	36	vacuum	vacuum	NOUN
fuelectenerg-384	73	37	and	and	CCONJ
fuelectenerg-384	73	38	material	material	NOUN
fuelectenerg-384	73	39	relative	relative	ADJ
fuelectenerg-384	73	40	dielectric	dielectric	ADJ
fuelectenerg-384	73	41	permittivity	permittivity	NOUN
fuelectenerg-384	73	42	and	and	CCONJ
fuelectenerg-384	73	43	δvmin	δvmin	NOUN
fuelectenerg-384	73	44	is	be	AUX
fuelectenerg-384	73	45	min	min	PROPN
fuelectenerg-384	73	46	min	min	PROPN
fuelectenerg-384	73	47	min	min	PROPN
fuelectenerg-384	73	48	(	(	PUNCT
fuelectenerg-384	73	49	)	)	PUNCT
fuelectenerg-384	74	1	(	(	PUNCT
fuelectenerg-384	74	2	0)v	0)v	X
fuelectenerg-384	74	3	v	v	ADP
fuelectenerg-384	74	4	t	t	PROPN
fuelectenerg-384	74	5	v	v	PROPN
fuelectenerg-384	75	1			PROPN
fuelectenerg-384	75	2			PROPN
fuelectenerg-384	75	3	(	(	PUNCT
fuelectenerg-384	75	4	6	6	NUM
fuelectenerg-384	75	5	)	)	PUNCT
fuelectenerg-384	75	6	fig	fig	NOUN
fuelectenerg-384	75	7	.	.	PUNCT
fuelectenerg-384	76	1	5	5	NUM
fuelectenerg-384	76	2	up	up	ADP
fuelectenerg-384	76	3	state	state	NOUN
fuelectenerg-384	76	4	c	c	NOUN
fuelectenerg-384	76	5	-	-	PUNCT
fuelectenerg-384	76	6	v	v	NOUN
fuelectenerg-384	76	7	curves	curve	NOUN
fuelectenerg-384	76	8	recorded	record	VERB
fuelectenerg-384	76	9	in	in	ADP
fuelectenerg-384	76	10	mems	mems	ADJ
fuelectenerg-384	76	11	switches	switch	NOUN
fuelectenerg-384	76	12	after	after	ADP
fuelectenerg-384	76	13	each	each	DET
fuelectenerg-384	76	14	successive	successive	ADJ
fuelectenerg-384	76	15	stress	stress	NOUN
fuelectenerg-384	76	16	step	step	NOUN
fuelectenerg-384	76	17	.	.	PUNCT
fuelectenerg-384	77	1	the	the	DET
fuelectenerg-384	77	2	arrow	arrow	NOUN
fuelectenerg-384	77	3	indicates	indicate	VERB
fuelectenerg-384	77	4	the	the	DET
fuelectenerg-384	77	5	shift	shift	NOUN
fuelectenerg-384	77	6	direction	direction	NOUN
fuelectenerg-384	77	7	and	and	CCONJ
fuelectenerg-384	77	8	the	the	DET
fuelectenerg-384	77	9	increase	increase	NOUN
fuelectenerg-384	77	10	of	of	ADP
fuelectenerg-384	77	11	time	time	NOUN
fuelectenerg-384	77	12	.	.	PUNCT
fuelectenerg-384	78	1	fig	fig	NOUN
fuelectenerg-384	78	2	.	.	PUNCT
fuelectenerg-384	79	1	6	6	NUM
fuelectenerg-384	79	2	mems	mem	NOUN
fuelectenerg-384	79	3	up	up	ADP
fuelectenerg-384	79	4	state	state	NOUN
fuelectenerg-384	79	5	c	c	NOUN
fuelectenerg-384	79	6	-	-	PUNCT
fuelectenerg-384	79	7	v	v	NOUN
fuelectenerg-384	79	8	minimum	minimum	NOUN
fuelectenerg-384	79	9	shift	shift	NOUN
fuelectenerg-384	79	10	versus	versus	ADP
fuelectenerg-384	79	11	charging	charge	VERB
fuelectenerg-384	79	12	time	time	NOUN
fuelectenerg-384	79	13	.	.	PUNCT
fuelectenerg-384	80	1	the	the	DET
fuelectenerg-384	80	2	shift	shift	NOUN
fuelectenerg-384	80	3	is	be	AUX
fuelectenerg-384	80	4	proportional	proportional	ADJ
fuelectenerg-384	80	5	to	to	ADP
fuelectenerg-384	80	6	the	the	DET
fuelectenerg-384	80	7	stored	store	VERB
fuelectenerg-384	80	8	charge	charge	NOUN
fuelectenerg-384	80	9	in	in	ADP
fuelectenerg-384	80	10	our	our	PRON
fuelectenerg-384	80	11	case	case	NOUN
fuelectenerg-384	80	12	the	the	DET
fuelectenerg-384	80	13	stored	store	VERB
fuelectenerg-384	80	14	charge	charge	NOUN
fuelectenerg-384	80	15	at	at	ADP
fuelectenerg-384	80	16	the	the	DET
fuelectenerg-384	80	17	surface	surface	NOUN
fuelectenerg-384	80	18	of	of	ADP
fuelectenerg-384	80	19	the	the	DET
fuelectenerg-384	80	20	dielectric	dielectric	ADJ
fuelectenerg-384	80	21	film	film	NOUN
fuelectenerg-384	80	22	after	after	SCONJ
fuelectenerg-384	80	23	5	5	NUM
fuelectenerg-384	80	24	minutes	minute	NOUN
fuelectenerg-384	80	25	stress	stress	VERB
fuelectenerg-384	80	26	under	under	ADP
fuelectenerg-384	80	27	a	a	DET
fuelectenerg-384	80	28	field	field	NOUN
fuelectenerg-384	80	29	of	of	ADP
fuelectenerg-384	80	30	1	1	NUM
fuelectenerg-384	80	31	mv	mv	NOUN
fuelectenerg-384	80	32	/	/	SYM
fuelectenerg-384	80	33	cm	cm	PROPN
fuelectenerg-384	80	34	has	have	AUX
fuelectenerg-384	80	35	been	be	AUX
fuelectenerg-384	80	36	calculated	calculate	VERB
fuelectenerg-384	80	37	to	to	PART
fuelectenerg-384	80	38	be	be	AUX
fuelectenerg-384	80	39	30	30	NUM
fuelectenerg-384	80	40	nc	nc	PROPN
fuelectenerg-384	80	41	/	/	SYM
fuelectenerg-384	80	42	cm	cm	NOUN
fuelectenerg-384	80	43	2	2	NUM
fuelectenerg-384	80	44	.	.	PUNCT
fuelectenerg-384	81	1	comparing	compare	VERB
fuelectenerg-384	81	2	the	the	DET
fuelectenerg-384	81	3	results	result	NOUN
fuelectenerg-384	81	4	obtained	obtain	VERB
fuelectenerg-384	81	5	by	by	ADP
fuelectenerg-384	81	6	the	the	DET
fuelectenerg-384	81	7	charge	charge	NOUN
fuelectenerg-384	81	8	current	current	ADJ
fuelectenerg-384	81	9	transient	transient	NOUN
fuelectenerg-384	81	10	(	(	PUNCT
fuelectenerg-384	81	11	cct	cct	NOUN
fuelectenerg-384	81	12	)	)	PUNCT
fuelectenerg-384	81	13	in	in	ADP
fuelectenerg-384	81	14	mim	mim	PROPN
fuelectenerg-384	81	15	and	and	CCONJ
fuelectenerg-384	81	16	kelvin	kelvin	PROPN
fuelectenerg-384	81	17	probe	probe	NOUN
fuelectenerg-384	81	18	technique	technique	NOUN
fuelectenerg-384	81	19	for	for	ADP
fuelectenerg-384	81	20	mems	mem	NOUN
fuelectenerg-384	81	21	and	and	CCONJ
fuelectenerg-384	81	22	taking	take	VERB
fuelectenerg-384	81	23	also	also	ADV
fuelectenerg-384	81	24	into	into	ADP
fuelectenerg-384	81	25	consideration	consideration	NOUN
fuelectenerg-384	81	26	similar	similar	ADJ
fuelectenerg-384	81	27	reports	report	NOUN
fuelectenerg-384	81	28	[	[	X
fuelectenerg-384	81	29	11118	11118	NUM
fuelectenerg-384	81	30	l.	l.	PROPN
fuelectenerg-384	81	31	michalas	michalas	PROPN
fuelectenerg-384	81	32	,	,	PUNCT
fuelectenerg-384	81	33	m.	m.	PROPN
fuelectenerg-384	81	34	koutsoureli	koutsoureli	PROPN
fuelectenerg-384	81	35	,	,	PUNCT
fuelectenerg-384	81	36	e.	e.	PROPN
fuelectenerg-384	81	37	papandreou	papandreou	PROPN
fuelectenerg-384	81	38	,	,	PUNCT
fuelectenerg-384	81	39	a.	a.	PROPN
fuelectenerg-384	81	40	gantis	gantis	PROPN
fuelectenerg-384	81	41	,	,	PUNCT
fuelectenerg-384	81	42	g.	g.	PROPN
fuelectenerg-384	81	43	papaioannou	papaioannou	PROPN
fuelectenerg-384	81	44	19	19	NUM
fuelectenerg-384	81	45	]	]	PUNCT
fuelectenerg-384	81	46	,	,	PUNCT
fuelectenerg-384	81	47	it	it	PRON
fuelectenerg-384	81	48	is	be	AUX
fuelectenerg-384	81	49	concluded	conclude	VERB
fuelectenerg-384	81	50	that	that	SCONJ
fuelectenerg-384	81	51	it	it	PRON
fuelectenerg-384	81	52	is	be	AUX
fuelectenerg-384	81	53	quite	quite	ADV
fuelectenerg-384	81	54	important	important	ADJ
fuelectenerg-384	81	55	to	to	PART
fuelectenerg-384	81	56	take	take	VERB
fuelectenerg-384	81	57	into	into	ADP
fuelectenerg-384	81	58	consideration	consideration	NOUN
fuelectenerg-384	81	59	that	that	SCONJ
fuelectenerg-384	81	60	charging	charge	VERB
fuelectenerg-384	81	61	in	in	ADP
fuelectenerg-384	81	62	mim	mim	PROPN
fuelectenerg-384	81	63	capacitors	capacitor	NOUN
fuelectenerg-384	81	64	occurs	occur	VERB
fuelectenerg-384	81	65	through	through	ADP
fuelectenerg-384	81	66	a	a	DET
fuelectenerg-384	81	67	perfect	perfect	ADJ
fuelectenerg-384	81	68	contact	contact	NOUN
fuelectenerg-384	81	69	under	under	ADP
fuelectenerg-384	81	70	uniform	uniform	ADJ
fuelectenerg-384	81	71	electric	electric	ADJ
fuelectenerg-384	81	72	field	field	NOUN
fuelectenerg-384	81	73	and	and	CCONJ
fuelectenerg-384	81	74	without	without	ADP
fuelectenerg-384	81	75	air	air	NOUN
fuelectenerg-384	81	76	gaps	gap	NOUN
fuelectenerg-384	81	77	that	that	PRON
fuelectenerg-384	81	78	are	be	AUX
fuelectenerg-384	81	79	always	always	ADV
fuelectenerg-384	81	80	present	present	ADJ
fuelectenerg-384	81	81	in	in	ADP
fuelectenerg-384	81	82	mems	mem	NOUN
fuelectenerg-384	81	83	due	due	ADP
fuelectenerg-384	81	84	to	to	ADP
fuelectenerg-384	81	85	surface	surface	NOUN
fuelectenerg-384	81	86	roughness	roughness	NOUN
fuelectenerg-384	81	87	.	.	PUNCT
fuelectenerg-384	82	1	therefore	therefore	ADV
fuelectenerg-384	82	2	even	even	ADV
fuelectenerg-384	82	3	the	the	DET
fuelectenerg-384	82	4	application	application	NOUN
fuelectenerg-384	82	5	of	of	ADP
fuelectenerg-384	82	6	the	the	DET
fuelectenerg-384	82	7	same	same	ADJ
fuelectenerg-384	82	8	field	field	NOUN
fuelectenerg-384	82	9	leads	lead	VERB
fuelectenerg-384	82	10	to	to	ADP
fuelectenerg-384	82	11	important	important	ADJ
fuelectenerg-384	82	12	differences	difference	NOUN
fuelectenerg-384	82	13	in	in	ADP
fuelectenerg-384	82	14	the	the	DET
fuelectenerg-384	82	15	charge	charge	NOUN
fuelectenerg-384	82	16	storage	storage	NOUN
fuelectenerg-384	82	17	in	in	ADP
fuelectenerg-384	82	18	the	the	DET
fuelectenerg-384	82	19	two	two	NUM
fuelectenerg-384	82	20	devices	device	NOUN
fuelectenerg-384	82	21	.	.	PUNCT
fuelectenerg-384	83	1	the	the	DET
fuelectenerg-384	83	2	charge	charge	NOUN
fuelectenerg-384	83	3	stored	store	VERB
fuelectenerg-384	83	4	in	in	ADP
fuelectenerg-384	83	5	mems	mem	NOUN
fuelectenerg-384	83	6	under	under	ADP
fuelectenerg-384	83	7	the	the	DET
fuelectenerg-384	83	8	application	application	NOUN
fuelectenerg-384	83	9	of	of	ADP
fuelectenerg-384	83	10	1	1	NUM
fuelectenerg-384	83	11	mv	mv	NOUN
fuelectenerg-384	83	12	/	/	SYM
fuelectenerg-384	83	13	cm	cm	NOUN
fuelectenerg-384	83	14	for	for	ADP
fuelectenerg-384	83	15	5	5	NUM
fuelectenerg-384	83	16	min	min	NOUN
fuelectenerg-384	83	17	was	be	AUX
fuelectenerg-384	83	18	calculated	calculate	VERB
fuelectenerg-384	83	19	to	to	PART
fuelectenerg-384	83	20	be	be	AUX
fuelectenerg-384	83	21	30	30	NUM
fuelectenerg-384	83	22	nc	nc	PROPN
fuelectenerg-384	83	23	/	/	SYM
fuelectenerg-384	83	24	cm	cm	NOUN
fuelectenerg-384	83	25	2	2	NUM
fuelectenerg-384	83	26	,	,	PUNCT
fuelectenerg-384	83	27	while	while	SCONJ
fuelectenerg-384	83	28	in	in	ADP
fuelectenerg-384	83	29	mim	mim	PROPN
fuelectenerg-384	83	30	it	it	PRON
fuelectenerg-384	83	31	exceeds	exceed	VERB
fuelectenerg-384	83	32	200	200	NUM
fuelectenerg-384	83	33	nc	nc	PROPN
fuelectenerg-384	83	34	/	/	SYM
fuelectenerg-384	83	35	cm	cm	PROPN
fuelectenerg-384	83	36	2	2	NUM
fuelectenerg-384	83	37	.	.	PUNCT
fuelectenerg-384	84	1	3.3	3.3	NUM
fuelectenerg-384	84	2	.	.	PUNCT
fuelectenerg-384	85	1	the	the	DET
fuelectenerg-384	85	2	discharging	discharge	VERB
fuelectenerg-384	85	3	process	process	NOUN
fuelectenerg-384	85	4	when	when	SCONJ
fuelectenerg-384	85	5	the	the	DET
fuelectenerg-384	85	6	actuation	actuation	NOUN
fuelectenerg-384	85	7	voltage	voltage	NOUN
fuelectenerg-384	85	8	is	be	AUX
fuelectenerg-384	85	9	no	no	ADV
fuelectenerg-384	85	10	longer	long	ADV
fuelectenerg-384	85	11	applied	apply	VERB
fuelectenerg-384	85	12	in	in	ADP
fuelectenerg-384	85	13	a	a	DET
fuelectenerg-384	85	14	mems	mem	NOUN
fuelectenerg-384	85	15	switch	switch	VERB
fuelectenerg-384	85	16	the	the	DET
fuelectenerg-384	85	17	bridge	bridge	NOUN
fuelectenerg-384	85	18	returns	return	NOUN
fuelectenerg-384	85	19	to	to	ADP
fuelectenerg-384	85	20	the	the	DET
fuelectenerg-384	85	21	up	up	NOUN
fuelectenerg-384	85	22	state	state	NOUN
fuelectenerg-384	85	23	position	position	NOUN
fuelectenerg-384	85	24	and	and	CCONJ
fuelectenerg-384	85	25	the	the	DET
fuelectenerg-384	85	26	electric	electric	ADJ
fuelectenerg-384	85	27	field	field	NOUN
fuelectenerg-384	85	28	is	be	AUX
fuelectenerg-384	85	29	no	no	ADV
fuelectenerg-384	85	30	longer	long	ADV
fuelectenerg-384	85	31	applied	apply	VERB
fuelectenerg-384	85	32	across	across	ADP
fuelectenerg-384	85	33	the	the	DET
fuelectenerg-384	85	34	dielectric	dielectric	ADJ
fuelectenerg-384	85	35	film	film	NOUN
fuelectenerg-384	85	36	.	.	PUNCT
fuelectenerg-384	86	1	this	this	PRON
fuelectenerg-384	86	2	is	be	AUX
fuelectenerg-384	86	3	the	the	DET
fuelectenerg-384	86	4	onset	onset	NOUN
fuelectenerg-384	86	5	of	of	ADP
fuelectenerg-384	86	6	the	the	DET
fuelectenerg-384	86	7	discharging	discharge	VERB
fuelectenerg-384	86	8	process	process	NOUN
fuelectenerg-384	86	9	.	.	PUNCT
fuelectenerg-384	87	1	the	the	DET
fuelectenerg-384	87	2	injected	inject	VERB
fuelectenerg-384	87	3	and	and	CCONJ
fuelectenerg-384	87	4	stored	store	VERB
fuelectenerg-384	87	5	charges	charge	NOUN
fuelectenerg-384	87	6	are	be	AUX
fuelectenerg-384	87	7	starting	start	VERB
fuelectenerg-384	87	8	to	to	PART
fuelectenerg-384	87	9	move	move	VERB
fuelectenerg-384	87	10	from	from	ADP
fuelectenerg-384	87	11	the	the	DET
fuelectenerg-384	87	12	surface	surface	NOUN
fuelectenerg-384	87	13	through	through	ADP
fuelectenerg-384	87	14	the	the	DET
fuelectenerg-384	87	15	dielectric	dielectric	ADJ
fuelectenerg-384	87	16	film	film	NOUN
fuelectenerg-384	87	17	to	to	ADP
fuelectenerg-384	87	18	the	the	DET
fuelectenerg-384	87	19	bottom	bottom	ADJ
fuelectenerg-384	87	20	contact	contact	NOUN
fuelectenerg-384	87	21	and	and	CCONJ
fuelectenerg-384	87	22	collected	collect	VERB
fuelectenerg-384	87	23	there	there	ADV
fuelectenerg-384	87	24	.	.	PUNCT
fuelectenerg-384	88	1	this	this	DET
fuelectenerg-384	88	2	charge	charge	NOUN
fuelectenerg-384	88	3	collection	collection	NOUN
fuelectenerg-384	88	4	process	process	NOUN
fuelectenerg-384	88	5	which	which	PRON
fuelectenerg-384	88	6	is	be	AUX
fuelectenerg-384	88	7	the	the	DET
fuelectenerg-384	88	8	most	most	ADV
fuelectenerg-384	88	9	essential	essential	ADJ
fuelectenerg-384	88	10	one	one	NUM
fuelectenerg-384	88	11	for	for	ADP
fuelectenerg-384	88	12	the	the	DET
fuelectenerg-384	88	13	device	device	NOUN
fuelectenerg-384	88	14	lifetime	lifetime	NOUN
fuelectenerg-384	88	15	occurs	occur	VERB
fuelectenerg-384	88	16	under	under	ADP
fuelectenerg-384	88	17	a	a	DET
fuelectenerg-384	88	18	very	very	ADV
fuelectenerg-384	88	19	low	low	ADJ
fuelectenerg-384	88	20	intrinsic	intrinsic	ADJ
fuelectenerg-384	88	21	field	field	NOUN
fuelectenerg-384	88	22	generated	generate	VERB
fuelectenerg-384	88	23	by	by	ADP
fuelectenerg-384	88	24	the	the	DET
fuelectenerg-384	88	25	injected	inject	VERB
fuelectenerg-384	88	26	charges	charge	NOUN
fuelectenerg-384	88	27	themselves	themselves	PRON
fuelectenerg-384	88	28	.	.	PUNCT
fuelectenerg-384	89	1	in	in	ADP
fuelectenerg-384	89	2	case	case	NOUN
fuelectenerg-384	89	3	of	of	ADP
fuelectenerg-384	89	4	mim	mim	PROPN
fuelectenerg-384	89	5	capacitors	capacitor	NOUN
fuelectenerg-384	89	6	there	there	PRON
fuelectenerg-384	89	7	are	be	VERB
fuelectenerg-384	89	8	two	two	NUM
fuelectenerg-384	89	9	types	type	NOUN
fuelectenerg-384	89	10	of	of	ADP
fuelectenerg-384	89	11	measurements	measurement	NOUN
fuelectenerg-384	89	12	associated	associate	VERB
fuelectenerg-384	89	13	to	to	ADP
fuelectenerg-384	89	14	the	the	DET
fuelectenerg-384	89	15	discharging	discharging	NOUN
fuelectenerg-384	89	16	of	of	ADP
fuelectenerg-384	89	17	the	the	DET
fuelectenerg-384	89	18	dielectric	dielectric	ADJ
fuelectenerg-384	89	19	film	film	NOUN
fuelectenerg-384	89	20	.	.	PUNCT
fuelectenerg-384	90	1	the	the	DET
fuelectenerg-384	90	2	first	first	ADJ
fuelectenerg-384	90	3	one	one	NOUN
fuelectenerg-384	90	4	is	be	AUX
fuelectenerg-384	90	5	the	the	DET
fuelectenerg-384	90	6	discharge	discharge	NOUN
fuelectenerg-384	90	7	current	current	ADJ
fuelectenerg-384	90	8	transient	transient	NOUN
fuelectenerg-384	90	9	(	(	PUNCT
fuelectenerg-384	90	10	dct	dct	PROPN
fuelectenerg-384	90	11	)	)	PUNCT
fuelectenerg-384	90	12	technique	technique	NOUN
fuelectenerg-384	90	13	which	which	PRON
fuelectenerg-384	90	14	is	be	AUX
fuelectenerg-384	90	15	actually	actually	ADV
fuelectenerg-384	90	16	the	the	DET
fuelectenerg-384	90	17	monitoring	monitoring	NOUN
fuelectenerg-384	90	18	of	of	ADP
fuelectenerg-384	90	19	the	the	DET
fuelectenerg-384	90	20	current	current	NOUN
fuelectenerg-384	90	21	arising	arise	VERB
fuelectenerg-384	90	22	by	by	ADP
fuelectenerg-384	90	23	the	the	DET
fuelectenerg-384	90	24	collection	collection	NOUN
fuelectenerg-384	90	25	of	of	ADP
fuelectenerg-384	90	26	the	the	DET
fuelectenerg-384	90	27	injected	inject	VERB
fuelectenerg-384	90	28	charges	charge	NOUN
fuelectenerg-384	90	29	by	by	ADP
fuelectenerg-384	90	30	short	short	ADJ
fuelectenerg-384	90	31	-	-	PUNCT
fuelectenerg-384	90	32	circuit	circuit	NOUN
fuelectenerg-384	90	33	of	of	ADP
fuelectenerg-384	90	34	the	the	DET
fuelectenerg-384	90	35	capacitor	capacitor	NOUN
fuelectenerg-384	90	36	.	.	PUNCT
fuelectenerg-384	91	1	in	in	ADP
fuelectenerg-384	91	2	this	this	DET
fuelectenerg-384	91	3	case	case	NOUN
fuelectenerg-384	91	4	the	the	DET
fuelectenerg-384	91	5	charges	charge	NOUN
fuelectenerg-384	91	6	are	be	AUX
fuelectenerg-384	91	7	collected	collect	VERB
fuelectenerg-384	91	8	by	by	ADP
fuelectenerg-384	91	9	the	the	DET
fuelectenerg-384	91	10	injection	injection	NOUN
fuelectenerg-384	91	11	electrode	electrode	NOUN
fuelectenerg-384	91	12	and	and	CCONJ
fuelectenerg-384	91	13	not	not	PART
fuelectenerg-384	91	14	through	through	ADP
fuelectenerg-384	91	15	the	the	DET
fuelectenerg-384	91	16	opposite	opposite	ADJ
fuelectenerg-384	91	17	one	one	NOUN
fuelectenerg-384	91	18	as	as	ADP
fuelectenerg-384	91	19	in	in	ADP
fuelectenerg-384	91	20	the	the	DET
fuelectenerg-384	91	21	case	case	NOUN
fuelectenerg-384	91	22	of	of	ADP
fuelectenerg-384	91	23	mems	mem	NOUN
fuelectenerg-384	91	24	.	.	PUNCT
fuelectenerg-384	92	1	therefore	therefore	ADV
fuelectenerg-384	92	2	the	the	DET
fuelectenerg-384	92	3	dct	dct	PROPN
fuelectenerg-384	92	4	technique	technique	NOUN
fuelectenerg-384	92	5	is	be	AUX
fuelectenerg-384	92	6	not	not	PART
fuelectenerg-384	92	7	suitable	suitable	ADJ
fuelectenerg-384	92	8	to	to	PART
fuelectenerg-384	92	9	provide	provide	VERB
fuelectenerg-384	92	10	valuable	valuable	ADJ
fuelectenerg-384	92	11	information	information	NOUN
fuelectenerg-384	92	12	on	on	ADP
fuelectenerg-384	92	13	the	the	DET
fuelectenerg-384	92	14	discharging	discharge	VERB
fuelectenerg-384	92	15	process	process	NOUN
fuelectenerg-384	92	16	in	in	ADP
fuelectenerg-384	92	17	mems	mem	NOUN
fuelectenerg-384	92	18	.	.	PUNCT
fuelectenerg-384	93	1	the	the	DET
fuelectenerg-384	93	2	discharging	discharge	VERB
fuelectenerg-384	93	3	process	process	NOUN
fuelectenerg-384	93	4	in	in	ADP
fuelectenerg-384	93	5	this	this	DET
fuelectenerg-384	93	6	case	case	NOUN
fuelectenerg-384	93	7	is	be	AUX
fuelectenerg-384	93	8	much	much	ADV
fuelectenerg-384	93	9	faster	fast	ADV
fuelectenerg-384	93	10	and	and	CCONJ
fuelectenerg-384	93	11	it	it	PRON
fuelectenerg-384	93	12	contains	contain	VERB
fuelectenerg-384	93	13	no	no	DET
fuelectenerg-384	93	14	information	information	NOUN
fuelectenerg-384	93	15	regarding	regard	VERB
fuelectenerg-384	93	16	the	the	DET
fuelectenerg-384	93	17	transport	transport	NOUN
fuelectenerg-384	93	18	of	of	ADP
fuelectenerg-384	93	19	charges	charge	NOUN
fuelectenerg-384	93	20	across	across	ADP
fuelectenerg-384	93	21	the	the	DET
fuelectenerg-384	93	22	dielectric	dielectric	ADJ
fuelectenerg-384	93	23	film	film	NOUN
fuelectenerg-384	93	24	.	.	PUNCT
fuelectenerg-384	94	1	however	however	ADV
fuelectenerg-384	94	2	,	,	PUNCT
fuelectenerg-384	94	3	the	the	DET
fuelectenerg-384	94	4	dct	dct	NOUN
fuelectenerg-384	94	5	technique	technique	NOUN
fuelectenerg-384	94	6	is	be	AUX
fuelectenerg-384	94	7	a	a	DET
fuelectenerg-384	94	8	powerful	powerful	ADJ
fuelectenerg-384	94	9	tool	tool	NOUN
fuelectenerg-384	94	10	to	to	PART
fuelectenerg-384	94	11	assess	assess	VERB
fuelectenerg-384	94	12	the	the	DET
fuelectenerg-384	94	13	material	material	NOUN
fuelectenerg-384	94	14	properties	property	NOUN
fuelectenerg-384	94	15	themselves	themselves	PRON
fuelectenerg-384	94	16	.	.	PUNCT
fuelectenerg-384	95	1	fig	fig	NOUN
fuelectenerg-384	95	2	.	.	PUNCT
fuelectenerg-384	96	1	7	7	NUM
fuelectenerg-384	96	2	presents	present	VERB
fuelectenerg-384	96	3	the	the	DET
fuelectenerg-384	96	4	discharge	discharge	NOUN
fuelectenerg-384	96	5	transient	transient	NOUN
fuelectenerg-384	96	6	obtained	obtain	VERB
fuelectenerg-384	96	7	from	from	ADP
fuelectenerg-384	96	8	mim	mim	PROPN
fuelectenerg-384	96	9	capacitors	capacitor	NOUN
fuelectenerg-384	96	10	charged	charge	VERB
fuelectenerg-384	96	11	up	up	ADP
fuelectenerg-384	96	12	to	to	PART
fuelectenerg-384	96	13	30	30	NUM
fuelectenerg-384	96	14	nc	nc	NOUN
fuelectenerg-384	96	15	/	/	SYM
fuelectenerg-384	96	16	cm	cm	PROPN
fuelectenerg-384	96	17	2	2	NUM
fuelectenerg-384	96	18	.	.	PUNCT
fuelectenerg-384	97	1	the	the	DET
fuelectenerg-384	97	2	time	time	NOUN
fuelectenerg-384	97	3	constant	constant	ADJ
fuelectenerg-384	97	4	obtained	obtain	VERB
fuelectenerg-384	97	5	in	in	ADP
fuelectenerg-384	97	6	this	this	DET
fuelectenerg-384	97	7	case	case	NOUN
fuelectenerg-384	97	8	is	be	AUX
fuelectenerg-384	97	9	only	only	ADV
fuelectenerg-384	97	10	300	300	NUM
fuelectenerg-384	97	11	sec	sec	PROPN
fuelectenerg-384	97	12	.	.	PUNCT
fuelectenerg-384	98	1	another	another	DET
fuelectenerg-384	98	2	approach	approach	NOUN
fuelectenerg-384	98	3	for	for	ADP
fuelectenerg-384	98	4	the	the	DET
fuelectenerg-384	98	5	assessment	assessment	NOUN
fuelectenerg-384	98	6	of	of	ADP
fuelectenerg-384	98	7	the	the	DET
fuelectenerg-384	98	8	discharging	discharge	VERB
fuelectenerg-384	98	9	process	process	NOUN
fuelectenerg-384	98	10	in	in	ADP
fuelectenerg-384	98	11	mim	mim	PROPN
fuelectenerg-384	98	12	capacitors	capacitor	NOUN
fuelectenerg-384	98	13	is	be	AUX
fuelectenerg-384	98	14	by	by	ADP
fuelectenerg-384	98	15	the	the	DET
fuelectenerg-384	98	16	application	application	NOUN
fuelectenerg-384	98	17	of	of	ADP
fuelectenerg-384	98	18	kelvin	kelvin	PROPN
fuelectenerg-384	98	19	probe	probe	PROPN
fuelectenerg-384	98	20	(	(	PUNCT
fuelectenerg-384	98	21	kp	kp	INTJ
fuelectenerg-384	98	22	)	)	PUNCT
fuelectenerg-384	98	23	method	method	NOUN
fuelectenerg-384	98	24	.	.	PUNCT
fuelectenerg-384	99	1	this	this	DET
fuelectenerg-384	99	2	technique	technique	NOUN
fuelectenerg-384	99	3	is	be	AUX
fuelectenerg-384	99	4	based	base	VERB
fuelectenerg-384	99	5	on	on	ADP
fuelectenerg-384	99	6	the	the	DET
fuelectenerg-384	99	7	monitoring	monitoring	NOUN
fuelectenerg-384	99	8	of	of	ADP
fuelectenerg-384	99	9	the	the	DET
fuelectenerg-384	99	10	surface	surface	NOUN
fuelectenerg-384	99	11	potential	potential	NOUN
fuelectenerg-384	99	12	of	of	ADP
fuelectenerg-384	99	13	a	a	DET
fuelectenerg-384	99	14	mim	mim	PROPN
fuelectenerg-384	99	15	capacitor	capacitor	NOUN
fuelectenerg-384	99	16	without	without	ADP
fuelectenerg-384	99	17	contact	contact	NOUN
fuelectenerg-384	99	18	(	(	PUNCT
fuelectenerg-384	99	19	fig	fig	NOUN
fuelectenerg-384	99	20	.	.	PUNCT
fuelectenerg-384	100	1	8)	8)	NUM
fuelectenerg-384	100	2	,	,	PUNCT
fuelectenerg-384	100	3	thus	thus	ADV
fuelectenerg-384	100	4	the	the	DET
fuelectenerg-384	100	5	discharging	discharging	NOUN
fuelectenerg-384	100	6	through	through	ADP
fuelectenerg-384	100	7	the	the	DET
fuelectenerg-384	100	8	bottom	bottom	ADJ
fuelectenerg-384	100	9	electrode	electrode	NOUN
fuelectenerg-384	100	10	.	.	PUNCT
fuelectenerg-384	101	1	kelvin	kelvin	PROPN
fuelectenerg-384	101	2	probe	probe	PROPN
fuelectenerg-384	101	3	method	method	PROPN
fuelectenerg-384	101	4	resembles	resemble	VERB
fuelectenerg-384	101	5	quite	quite	ADV
fuelectenerg-384	101	6	realistically	realistically	ADV
fuelectenerg-384	101	7	the	the	DET
fuelectenerg-384	101	8	discharging	discharge	VERB
fuelectenerg-384	101	9	process	process	NOUN
fuelectenerg-384	101	10	in	in	ADP
fuelectenerg-384	101	11	rf	rf	NOUN
fuelectenerg-384	101	12	mems	mem	NOUN
fuelectenerg-384	101	13	.	.	PUNCT
fuelectenerg-384	102	1	indeed	indeed	ADV
fuelectenerg-384	102	2	the	the	DET
fuelectenerg-384	102	3	results	result	NOUN
fuelectenerg-384	102	4	obtained	obtain	VERB
fuelectenerg-384	102	5	after	after	ADP
fuelectenerg-384	102	6	charging	charge	VERB
fuelectenerg-384	102	7	the	the	DET
fuelectenerg-384	102	8	mim	mim	PROPN
fuelectenerg-384	102	9	with	with	ADP
fuelectenerg-384	102	10	the	the	DET
fuelectenerg-384	102	11	equivalent	equivalent	ADJ
fuelectenerg-384	102	12	charge	charge	NOUN
fuelectenerg-384	102	13	denote	denote	VERB
fuelectenerg-384	102	14	that	that	SCONJ
fuelectenerg-384	102	15	this	this	DET
fuelectenerg-384	102	16	technique	technique	NOUN
fuelectenerg-384	102	17	can	can	AUX
fuelectenerg-384	102	18	be	be	AUX
fuelectenerg-384	102	19	used	use	VERB
fuelectenerg-384	102	20	to	to	PART
fuelectenerg-384	102	21	obtain	obtain	VERB
fuelectenerg-384	102	22	information	information	NOUN
fuelectenerg-384	102	23	from	from	ADP
fuelectenerg-384	102	24	mim	mim	PROPN
fuelectenerg-384	102	25	to	to	ADP
fuelectenerg-384	102	26	mems	mem	NOUN
fuelectenerg-384	102	27	.	.	PUNCT
fuelectenerg-384	103	1	the	the	DET
fuelectenerg-384	103	2	time	time	NOUN
fuelectenerg-384	103	3	constant	constant	ADJ
fuelectenerg-384	103	4	is	be	AUX
fuelectenerg-384	103	5	in	in	ADP
fuelectenerg-384	103	6	the	the	DET
fuelectenerg-384	103	7	same	same	ADJ
fuelectenerg-384	103	8	order	order	NOUN
fuelectenerg-384	103	9	of	of	ADP
fuelectenerg-384	103	10	10	10	NUM
fuelectenerg-384	103	11	4	4	NUM
fuelectenerg-384	103	12	sec	sec	PROPN
fuelectenerg-384	103	13	,	,	PUNCT
fuelectenerg-384	103	14	while	while	SCONJ
fuelectenerg-384	103	15	in	in	ADP
fuelectenerg-384	103	16	both	both	DET
fuelectenerg-384	103	17	cases	case	NOUN
fuelectenerg-384	103	18	the	the	DET
fuelectenerg-384	103	19	discharging	discharging	NOUN
fuelectenerg-384	103	20	obeys	obey	VERB
fuelectenerg-384	103	21	the	the	DET
fuelectenerg-384	103	22	stretched	stretch	VERB
fuelectenerg-384	103	23	exponential	exponential	ADJ
fuelectenerg-384	103	24	relaxation	relaxation	NOUN
fuelectenerg-384	103	25	.	.	PUNCT
fuelectenerg-384	104	1	it	it	PRON
fuelectenerg-384	104	2	is	be	AUX
fuelectenerg-384	104	3	worth	worth	ADJ
fuelectenerg-384	104	4	to	to	PART
fuelectenerg-384	104	5	mention	mention	VERB
fuelectenerg-384	104	6	that	that	SCONJ
fuelectenerg-384	104	7	similar	similar	ADJ
fuelectenerg-384	104	8	studies	study	NOUN
fuelectenerg-384	104	9	based	base	VERB
fuelectenerg-384	104	10	on	on	ADP
fuelectenerg-384	104	11	kelvin	kelvin	PROPN
fuelectenerg-384	104	12	probe	probe	PROPN
fuelectenerg-384	104	13	force	force	PROPN
fuelectenerg-384	104	14	microscopy	microscopy	PROPN
fuelectenerg-384	104	15	(	(	PUNCT
fuelectenerg-384	104	16	kpfm	kpfm	NOUN
fuelectenerg-384	104	17	)	)	PUNCT
fuelectenerg-384	104	18	on	on	ADP
fuelectenerg-384	104	19	metal	metal	NOUN
fuelectenerg-384	104	20	free	free	ADJ
fuelectenerg-384	104	21	dielectric	dielectric	ADJ
fuelectenerg-384	104	22	film	film	NOUN
fuelectenerg-384	104	23	surfaces	surface	NOUN
fuelectenerg-384	104	24	have	have	AUX
fuelectenerg-384	104	25	been	be	AUX
fuelectenerg-384	104	26	already	already	ADV
fuelectenerg-384	104	27	reported	report	VERB
fuelectenerg-384	104	28	in	in	ADP
fuelectenerg-384	104	29	the	the	DET
fuelectenerg-384	104	30	past	past	NOUN
fuelectenerg-384	104	31	[	[	X
fuelectenerg-384	104	32	14	14	NUM
fuelectenerg-384	104	33	]	]	PUNCT
fuelectenerg-384	104	34	.	.	PUNCT
fuelectenerg-384	105	1	however	however	ADV
fuelectenerg-384	105	2	,	,	PUNCT
fuelectenerg-384	105	3	there	there	PRON
fuelectenerg-384	105	4	is	be	VERB
fuelectenerg-384	105	5	a	a	DET
fuelectenerg-384	105	6	difference	difference	NOUN
fuelectenerg-384	105	7	between	between	ADP
fuelectenerg-384	105	8	the	the	DET
fuelectenerg-384	105	9	kpfm	kpfm	NOUN
fuelectenerg-384	105	10	and	and	CCONJ
fuelectenerg-384	105	11	kp	kp	PROPN
fuelectenerg-384	105	12	method	method	PROPN
fuelectenerg-384	105	13	.	.	PUNCT
fuelectenerg-384	106	1	the	the	DET
fuelectenerg-384	106	2	first	first	ADJ
fuelectenerg-384	106	3	assesses	assess	VERB
fuelectenerg-384	106	4	the	the	DET
fuelectenerg-384	106	5	surface	surface	NOUN
fuelectenerg-384	106	6	potential	potential	NOUN
fuelectenerg-384	106	7	by	by	ADP
fuelectenerg-384	106	8	minimizing	minimize	VERB
fuelectenerg-384	106	9	the	the	DET
fuelectenerg-384	106	10	electrostatic	electrostatic	ADJ
fuelectenerg-384	106	11	force	force	NOUN
fuelectenerg-384	106	12	on	on	ADP
fuelectenerg-384	106	13	the	the	DET
fuelectenerg-384	106	14	system	system	NOUN
fuelectenerg-384	106	15	tip	tip	NOUN
fuelectenerg-384	106	16	.	.	PUNCT
fuelectenerg-384	107	1	the	the	DET
fuelectenerg-384	107	2	second	second	ADJ
fuelectenerg-384	107	3	by	by	ADP
fuelectenerg-384	107	4	minimizes	minimize	VERB
fuelectenerg-384	107	5	the	the	DET
fuelectenerg-384	107	6	current	current	NOUN
fuelectenerg-384	107	7	through	through	ADP
fuelectenerg-384	107	8	a	a	DET
fuelectenerg-384	107	9	vibrating	vibrate	VERB
fuelectenerg-384	107	10	capacitor	capacitor	NOUN
fuelectenerg-384	107	11	[	[	X
fuelectenerg-384	107	12	25	25	NUM
fuelectenerg-384	107	13	]	]	PUNCT
fuelectenerg-384	107	14	.	.	PUNCT
fuelectenerg-384	108	1	the	the	DET
fuelectenerg-384	108	2	presence	presence	NOUN
fuelectenerg-384	108	3	of	of	ADP
fuelectenerg-384	108	4	the	the	DET
fuelectenerg-384	108	5	mim	mim	PROPN
fuelectenerg-384	108	6	top	top	ADJ
fuelectenerg-384	108	7	electrode	electrode	NOUN
fuelectenerg-384	108	8	ensures	ensure	VERB
fuelectenerg-384	108	9	uniform	uniform	ADJ
fuelectenerg-384	108	10	electric	electric	ADJ
fuelectenerg-384	108	11	field	field	NOUN
fuelectenerg-384	108	12	arising	arise	VERB
fuelectenerg-384	108	13	from	from	ADP
fuelectenerg-384	108	14	the	the	DET
fuelectenerg-384	108	15	charge	charge	NOUN
fuelectenerg-384	108	16	at	at	ADP
fuelectenerg-384	108	17	the	the	DET
fuelectenerg-384	108	18	surface	surface	NOUN
fuelectenerg-384	108	19	of	of	ADP
fuelectenerg-384	108	20	the	the	DET
fuelectenerg-384	108	21	dielectric	dielectric	ADJ
fuelectenerg-384	108	22	film	film	NOUN
fuelectenerg-384	108	23	.	.	PUNCT
fuelectenerg-384	109	1	in	in	ADP
fuelectenerg-384	109	2	addition	addition	NOUN
fuelectenerg-384	109	3	,	,	PUNCT
fuelectenerg-384	109	4	the	the	DET
fuelectenerg-384	109	5	kpfm	kpfm	NOUN
fuelectenerg-384	109	6	method	method	NOUN
fuelectenerg-384	109	7	has	have	AUX
fuelectenerg-384	109	8	been	be	AUX
fuelectenerg-384	109	9	used	use	VERB
fuelectenerg-384	109	10	to	to	PART
fuelectenerg-384	109	11	assess	assess	VERB
fuelectenerg-384	109	12	the	the	DET
fuelectenerg-384	109	13	charge	charge	NOUN
fuelectenerg-384	109	14	distribution	distribution	NOUN
fuelectenerg-384	109	15	of	of	ADP
fuelectenerg-384	109	16	very	very	ADV
fuelectenerg-384	109	17	small	small	ADJ
fuelectenerg-384	109	18	surfaces	surface	NOUN
fuelectenerg-384	109	19	and	and	CCONJ
fuelectenerg-384	109	20	the	the	DET
fuelectenerg-384	109	21	delay	delay	NOUN
fuelectenerg-384	109	22	caused	cause	VERB
fuelectenerg-384	109	23	by	by	ADP
fuelectenerg-384	109	24	sweeping	sweep	VERB
fuelectenerg-384	109	25	the	the	DET
fuelectenerg-384	109	26	kpfm	kpfm	NOUN
fuelectenerg-384	109	27	tip	tip	NOUN
fuelectenerg-384	109	28	across	across	ADP
fuelectenerg-384	109	29	the	the	DET
fuelectenerg-384	109	30	surface	surface	NOUN
fuelectenerg-384	109	31	does	do	AUX
fuelectenerg-384	109	32	not	not	PART
fuelectenerg-384	109	33	allow	allow	VERB
fuelectenerg-384	109	34	the	the	DET
fuelectenerg-384	109	35	real	real	ADJ
fuelectenerg-384	109	36	time	time	NOUN
fuelectenerg-384	109	37	measurement	measurement	NOUN
fuelectenerg-384	109	38	of	of	ADP
fuelectenerg-384	109	39	the	the	DET
fuelectenerg-384	109	40	charge	charge	NOUN
fuelectenerg-384	109	41	dissipation	dissipation	NOUN
fuelectenerg-384	109	42	.	.	PUNCT
fuelectenerg-384	110	1	thus	thus	ADV
fuelectenerg-384	110	2	,	,	PUNCT
fuelectenerg-384	110	3	although	although	SCONJ
fuelectenerg-384	110	4	the	the	DET
fuelectenerg-384	110	5	kp	kp	PROPN
fuelectenerg-384	110	6	method	method	NOUN
fuelectenerg-384	110	7	does	do	AUX
fuelectenerg-384	110	8	not	not	PART
fuelectenerg-384	110	9	resemble	resemble	VERB
fuelectenerg-384	110	10	the	the	DET
fuelectenerg-384	110	11	real	real	ADJ
fuelectenerg-384	110	12	mems	mem	NOUN
fuelectenerg-384	110	13	discharge	discharge	NOUN
fuelectenerg-384	110	14	,	,	PUNCT
fuelectenerg-384	110	15	it	it	PRON
fuelectenerg-384	110	16	provides	provide	VERB
fuelectenerg-384	110	17	a	a	DET
fuelectenerg-384	110	18	more	more	ADV
fuelectenerg-384	110	19	accurate	accurate	ADJ
fuelectenerg-384	110	20	determination	determination	NOUN
fuelectenerg-384	110	21	of	of	ADP
fuelectenerg-384	110	22	discharge	discharge	NOUN
fuelectenerg-384	110	23	process	process	NOUN
fuelectenerg-384	110	24	,	,	PUNCT
fuelectenerg-384	110	25	normal	normal	ADJ
fuelectenerg-384	110	26	to	to	PART
fuelectenerg-384	110	27	film	film	VERB
fuelectenerg-384	110	28	surface	surface	NOUN
fuelectenerg-384	110	29	,	,	PUNCT
fuelectenerg-384	110	30	that	that	PRON
fuelectenerg-384	110	31	is	be	AUX
fuelectenerg-384	110	32	not	not	PART
fuelectenerg-384	110	33	affected	affect	VERB
fuelectenerg-384	110	34	by	by	ADP
fuelectenerg-384	110	35	lateral	lateral	ADJ
fuelectenerg-384	110	36	charge	charge	NOUN
fuelectenerg-384	110	37	diffusion	diffusion	NOUN
fuelectenerg-384	110	38	as	as	SCONJ
fuelectenerg-384	110	39	shown	show	VERB
fuelectenerg-384	110	40	in	in	ADP
fuelectenerg-384	110	41	[	[	X
fuelectenerg-384	110	42	24	24	NUM
fuelectenerg-384	110	43	]	]	PUNCT
fuelectenerg-384	110	44	a	a	DET
fuelectenerg-384	110	45	mim	mim	PROPN
fuelectenerg-384	110	46	capacitor	capacitor	NOUN
fuelectenerg-384	110	47	study	study	NOUN
fuelectenerg-384	110	48	of	of	ADP
fuelectenerg-384	110	49	dielectric	dielectric	ADJ
fuelectenerg-384	110	50	charging	charging	NOUN
fuelectenerg-384	110	51	for	for	ADP
fuelectenerg-384	110	52	rf	rf	VERB
fuelectenerg-384	110	53	mems	mem	NOUN
fuelectenerg-384	110	54	capacitive	capacitive	ADJ
fuelectenerg-384	110	55	switches	switch	VERB
fuelectenerg-384	110	56	119	119	NUM
fuelectenerg-384	110	57	fig	fig	NOUN
fuelectenerg-384	110	58	.	.	PUNCT
fuelectenerg-384	111	1	7	7	NUM
fuelectenerg-384	111	2	discharge	discharge	NOUN
fuelectenerg-384	111	3	current	current	ADJ
fuelectenerg-384	111	4	transient	transient	NOUN
fuelectenerg-384	111	5	obtained	obtain	VERB
fuelectenerg-384	111	6	in	in	ADP
fuelectenerg-384	111	7	mim	mim	PROPN
fuelectenerg-384	111	8	capacitor	capacitor	NOUN
fuelectenerg-384	111	9	charged	charge	VERB
fuelectenerg-384	111	10	up	up	ADP
fuelectenerg-384	111	11	to	to	ADP
fuelectenerg-384	111	12	30nc	30nc	ADJ
fuelectenerg-384	111	13	/	/	SYM
fuelectenerg-384	111	14	cm	cm	NOUN
fuelectenerg-384	111	15	2	2	NUM
fuelectenerg-384	111	16	fig	fig	NOUN
fuelectenerg-384	111	17	.	.	PUNCT
fuelectenerg-384	111	18	8	8	NUM
fuelectenerg-384	112	1	the	the	DET
fuelectenerg-384	112	2	discharging	discharge	VERB
fuelectenerg-384	112	3	process	process	NOUN
fuelectenerg-384	112	4	through	through	ADP
fuelectenerg-384	112	5	the	the	DET
fuelectenerg-384	112	6	dielectric	dielectric	ADJ
fuelectenerg-384	112	7	film	film	NOUN
fuelectenerg-384	112	8	as	as	SCONJ
fuelectenerg-384	112	9	obtained	obtain	VERB
fuelectenerg-384	112	10	in	in	ADP
fuelectenerg-384	112	11	mim	mim	PROPN
fuelectenerg-384	112	12	capacitors	capacitor	NOUN
fuelectenerg-384	112	13	charged	charge	VERB
fuelectenerg-384	112	14	up	up	ADP
fuelectenerg-384	112	15	to	to	ADP
fuelectenerg-384	112	16	30nc	30nc	ADJ
fuelectenerg-384	112	17	/	/	SYM
fuelectenerg-384	112	18	cm	cm	NOUN
fuelectenerg-384	112	19	2	2	NUM
fuelectenerg-384	112	20	regarding	regard	VERB
fuelectenerg-384	112	21	the	the	DET
fuelectenerg-384	112	22	stretched	stretch	VERB
fuelectenerg-384	112	23	exponential	exponential	ADJ
fuelectenerg-384	112	24	relaxation	relaxation	NOUN
fuelectenerg-384	112	25	,	,	PUNCT
fuelectenerg-384	112	26	the	the	DET
fuelectenerg-384	112	27	transient	transient	ADJ
fuelectenerg-384	112	28	decay	decay	NOUN
fuelectenerg-384	112	29	is	be	AUX
fuelectenerg-384	112	30	expressed	express	VERB
fuelectenerg-384	112	31	by	by	ADP
fuelectenerg-384	112	32	the	the	DET
fuelectenerg-384	112	33	following	follow	VERB
fuelectenerg-384	112	34	equation	equation	NOUN
fuelectenerg-384	112	35	0	0	NUM
fuelectenerg-384	112	36	exp	exp	NOUN
fuelectenerg-384	112	37	t	t	PROPN
fuelectenerg-384	112	38	v	v	NOUN
fuelectenerg-384	112	39	v	v	ADP
fuelectenerg-384	112	40			PROPN
fuelectenerg-384	112	41			NOUN
fuelectenerg-384	113	1			PROPN
fuelectenerg-384	114	1			PROPN
fuelectenerg-384	114	2			PROPN
fuelectenerg-384	114	3			PUNCT
fuelectenerg-384	115	1			X
fuelectenerg-384	115	2			NOUN
fuelectenerg-384	115	3			NUM
fuelectenerg-384	115	4			NOUN
fuelectenerg-384	115	5			PRON
fuelectenerg-384	115	6			PROPN
fuelectenerg-384	115	7			PROPN
fuelectenerg-384	115	8			PROPN
fuelectenerg-384	115	9			PROPN
fuelectenerg-384	115	10	(	(	PUNCT
fuelectenerg-384	115	11	7	7	NUM
fuelectenerg-384	115	12	)	)	PUNCT
fuelectenerg-384	115	13	where	where	SCONJ
fuelectenerg-384	115	14	τ	τ	PROPN
fuelectenerg-384	115	15	is	be	AUX
fuelectenerg-384	115	16	the	the	DET
fuelectenerg-384	115	17	time	time	NOUN
fuelectenerg-384	115	18	constant	constant	ADJ
fuelectenerg-384	115	19	for	for	ADP
fuelectenerg-384	115	20	the	the	DET
fuelectenerg-384	115	21	discharging	discharging	NOUN
fuelectenerg-384	115	22	process	process	NOUN
fuelectenerg-384	115	23	,	,	PUNCT
fuelectenerg-384	115	24	usually	usually	ADV
fuelectenerg-384	115	25	referred	refer	VERB
fuelectenerg-384	115	26	as	as	ADP
fuelectenerg-384	115	27	relaxation	relaxation	NOUN
fuelectenerg-384	115	28	time	time	NOUN
fuelectenerg-384	115	29	,	,	PUNCT
fuelectenerg-384	115	30	and	and	CCONJ
fuelectenerg-384	115	31	β	β	X
fuelectenerg-384	115	32	is	be	AUX
fuelectenerg-384	115	33	the	the	DET
fuelectenerg-384	115	34	stretched	stretch	VERB
fuelectenerg-384	115	35	factor	factor	NOUN
fuelectenerg-384	115	36	(	(	PUNCT
fuelectenerg-384	115	37	0	0	NUM
fuelectenerg-384	115	38	<	<	X
fuelectenerg-384	115	39	β<1	β<1	NOUN
fuelectenerg-384	115	40	)	)	PUNCT
fuelectenerg-384	115	41	,	,	PUNCT
fuelectenerg-384	115	42	and	and	CCONJ
fuelectenerg-384	115	43	is	be	AUX
fuelectenerg-384	115	44	commonly	commonly	ADV
fuelectenerg-384	115	45	observed	observe	VERB
fuelectenerg-384	115	46	in	in	ADP
fuelectenerg-384	115	47	many	many	ADJ
fuelectenerg-384	115	48	systems	system	NOUN
fuelectenerg-384	115	49	with	with	ADP
fuelectenerg-384	115	50	important	important	ADJ
fuelectenerg-384	115	51	degree	degree	NOUN
fuelectenerg-384	115	52	of	of	ADP
fuelectenerg-384	115	53	disorder	disorder	NOUN
fuelectenerg-384	115	54	like	like	ADP
fuelectenerg-384	115	55	amorphous	amorphous	ADJ
fuelectenerg-384	115	56	materials	material	NOUN
fuelectenerg-384	115	57	[	[	X
fuelectenerg-384	115	58	26	26	NUM
fuelectenerg-384	115	59	]	]	PUNCT
fuelectenerg-384	115	60	.	.	PUNCT
fuelectenerg-384	116	1	in	in	ADP
fuelectenerg-384	116	2	mems	mems	PROPN
fuelectenerg-384	116	3	switches	switch	VERB
fuelectenerg-384	116	4	the	the	DET
fuelectenerg-384	116	5	discharging	discharge	VERB
fuelectenerg-384	116	6	process	process	NOUN
fuelectenerg-384	116	7	is	be	AUX
fuelectenerg-384	116	8	quite	quite	ADV
fuelectenerg-384	116	9	accurately	accurately	ADV
fuelectenerg-384	116	10	monitored	monitor	VERB
fuelectenerg-384	116	11	by	by	ADP
fuelectenerg-384	116	12	recording	record	VERB
fuelectenerg-384	116	13	the	the	DET
fuelectenerg-384	116	14	position	position	NOUN
fuelectenerg-384	116	15	of	of	ADP
fuelectenerg-384	116	16	the	the	DET
fuelectenerg-384	116	17	bias	bias	NOUN
fuelectenerg-384	116	18	corresponding	correspond	VERB
fuelectenerg-384	116	19	to	to	ADP
fuelectenerg-384	116	20	the	the	DET
fuelectenerg-384	116	21	minimum	minimum	NOUN
fuelectenerg-384	116	22	up	up	ADP
fuelectenerg-384	116	23	state	state	NOUN
fuelectenerg-384	116	24	capacitance	capacitance	NOUN
fuelectenerg-384	116	25	(	(	PUNCT
fuelectenerg-384	116	26	fig	fig	NOUN
fuelectenerg-384	116	27	.	.	PUNCT
fuelectenerg-384	117	1	9	9	NUM
fuelectenerg-384	117	2	)	)	PUNCT
fuelectenerg-384	118	1	[	[	X
fuelectenerg-384	118	2	20	20	NUM
fuelectenerg-384	118	3	]	]	PUNCT
fuelectenerg-384	118	4	.	.	PUNCT
fuelectenerg-384	119	1	in	in	ADP
fuelectenerg-384	119	2	our	our	PRON
fuelectenerg-384	119	3	case	case	NOUN
fuelectenerg-384	119	4	mems	mem	NOUN
fuelectenerg-384	119	5	switches	switch	NOUN
fuelectenerg-384	119	6	have	have	AUX
fuelectenerg-384	119	7	been	be	AUX
fuelectenerg-384	119	8	stressed	stress	VERB
fuelectenerg-384	119	9	under	under	ADP
fuelectenerg-384	119	10	the	the	DET
fuelectenerg-384	119	11	applied	apply	VERB
fuelectenerg-384	119	12	field	field	NOUN
fuelectenerg-384	119	13	of	of	ADP
fuelectenerg-384	119	14	1	1	NUM
fuelectenerg-384	119	15	mv	mv	NOUN
fuelectenerg-384	119	16	/	/	SYM
fuelectenerg-384	119	17	cm	cm	NOUN
fuelectenerg-384	119	18	for	for	ADP
fuelectenerg-384	119	19	5	5	NUM
fuelectenerg-384	119	20	min	min	NOUN
fuelectenerg-384	119	21	which	which	PRON
fuelectenerg-384	119	22	as	as	SCONJ
fuelectenerg-384	119	23	mentioned	mention	VERB
fuelectenerg-384	119	24	in	in	ADP
fuelectenerg-384	119	25	the	the	DET
fuelectenerg-384	119	26	previous	previous	ADJ
fuelectenerg-384	119	27	sections	section	NOUN
fuelectenerg-384	119	28	results	result	VERB
fuelectenerg-384	119	29	in	in	ADP
fuelectenerg-384	119	30	charge	charge	NOUN
fuelectenerg-384	119	31	storage	storage	NOUN
fuelectenerg-384	119	32	of	of	ADP
fuelectenerg-384	119	33	30nc	30nc	ADJ
fuelectenerg-384	119	34	/	/	SYM
fuelectenerg-384	119	35	cm	cm	NOUN
fuelectenerg-384	119	36	2	2	NUM
fuelectenerg-384	119	37	.	.	PUNCT
fuelectenerg-384	120	1	the	the	DET
fuelectenerg-384	120	2	following	follow	VERB
fuelectenerg-384	120	3	discharging	discharge	VERB
fuelectenerg-384	120	4	process	process	NOUN
fuelectenerg-384	120	5	is	be	AUX
fuelectenerg-384	120	6	presented	present	VERB
fuelectenerg-384	120	7	in	in	ADP
fuelectenerg-384	120	8	fig	fig	NOUN
fuelectenerg-384	120	9	.	.	PUNCT
fuelectenerg-384	121	1	10	10	NUM
fuelectenerg-384	121	2	.	.	PUNCT
fuelectenerg-384	122	1	the	the	DET
fuelectenerg-384	122	2	discharging	discharge	VERB
fuelectenerg-384	122	3	process	process	NOUN
fuelectenerg-384	122	4	is	be	AUX
fuelectenerg-384	122	5	found	find	VERB
fuelectenerg-384	122	6	to	to	PART
fuelectenerg-384	122	7	obey	obey	VERB
fuelectenerg-384	122	8	the	the	DET
fuelectenerg-384	122	9	stretched	stretch	VERB
fuelectenerg-384	122	10	exponential	exponential	ADJ
fuelectenerg-384	122	11	relaxation	relaxation	NOUN
fuelectenerg-384	122	12	mechanism	mechanism	NOUN
fuelectenerg-384	122	13	with	with	ADP
fuelectenerg-384	122	14	a	a	DET
fuelectenerg-384	122	15	time	time	NOUN
fuelectenerg-384	122	16	constant	constant	ADJ
fuelectenerg-384	122	17	in	in	ADP
fuelectenerg-384	122	18	the	the	DET
fuelectenerg-384	122	19	range	range	NOUN
fuelectenerg-384	122	20	of	of	ADP
fuelectenerg-384	122	21	10	10	NUM
fuelectenerg-384	122	22	4	4	NUM
fuelectenerg-384	122	23	sec	sec	PROPN
fuelectenerg-384	122	24	.	.	PUNCT
fuelectenerg-384	122	25	fig	fig	PROPN
fuelectenerg-384	122	26	.	.	PUNCT
fuelectenerg-384	123	1	9	9	NUM
fuelectenerg-384	123	2	up	up	ADP
fuelectenerg-384	123	3	state	state	NOUN
fuelectenerg-384	123	4	c	c	NOUN
fuelectenerg-384	123	5	-	-	PUNCT
fuelectenerg-384	123	6	v	v	NOUN
fuelectenerg-384	123	7	curves	curve	NOUN
fuelectenerg-384	123	8	recorded	record	VERB
fuelectenerg-384	123	9	in	in	ADP
fuelectenerg-384	123	10	mems	mems	ADJ
fuelectenerg-384	123	11	switches	switch	NOUN
fuelectenerg-384	123	12	during	during	ADP
fuelectenerg-384	123	13	discharging	discharge	VERB
fuelectenerg-384	123	14	process	process	NOUN
fuelectenerg-384	123	15	.	.	PUNCT
fuelectenerg-384	124	1	the	the	DET
fuelectenerg-384	124	2	minimum	minimum	NOUN
fuelectenerg-384	124	3	gradually	gradually	ADV
fuelectenerg-384	124	4	returns	return	VERB
fuelectenerg-384	124	5	to	to	ADP
fuelectenerg-384	124	6	the	the	DET
fuelectenerg-384	124	7	initial	initial	ADJ
fuelectenerg-384	124	8	position	position	NOUN
fuelectenerg-384	124	9	denoting	denote	VERB
fuelectenerg-384	124	10	film	film	NOUN
fuelectenerg-384	124	11	discharging	discharging	NOUN
fuelectenerg-384	124	12	.	.	PUNCT
fuelectenerg-384	125	1	the	the	DET
fuelectenerg-384	125	2	arrow	arrow	NOUN
fuelectenerg-384	125	3	indicates	indicate	VERB
fuelectenerg-384	125	4	the	the	DET
fuelectenerg-384	125	5	shift	shift	NOUN
fuelectenerg-384	125	6	direction	direction	NOUN
fuelectenerg-384	125	7	and	and	CCONJ
fuelectenerg-384	125	8	the	the	DET
fuelectenerg-384	125	9	increase	increase	NOUN
fuelectenerg-384	125	10	of	of	ADP
fuelectenerg-384	125	11	time	time	NOUN
fuelectenerg-384	125	12	.	.	PUNCT
fuelectenerg-384	126	1	fig	fig	NOUN
fuelectenerg-384	126	2	.	.	PUNCT
fuelectenerg-384	127	1	10	10	NUM
fuelectenerg-384	127	2	position	position	NOUN
fuelectenerg-384	127	3	of	of	ADP
fuelectenerg-384	127	4	the	the	DET
fuelectenerg-384	127	5	minimum	minimum	NOUN
fuelectenerg-384	127	6	as	as	ADP
fuelectenerg-384	127	7	a	a	DET
fuelectenerg-384	127	8	function	function	NOUN
fuelectenerg-384	127	9	of	of	ADP
fuelectenerg-384	127	10	the	the	DET
fuelectenerg-384	127	11	discharging	discharging	NOUN
fuelectenerg-384	127	12	time	time	NOUN
fuelectenerg-384	127	13	.	.	PUNCT
fuelectenerg-384	128	1	monitoring	monitoring	NOUN
fuelectenerg-384	128	2	of	of	ADP
fuelectenerg-384	128	3	the	the	DET
fuelectenerg-384	128	4	discharging	discharge	VERB
fuelectenerg-384	128	5	process	process	NOUN
fuelectenerg-384	128	6	in	in	ADP
fuelectenerg-384	128	7	mems	mems	PROPN
fuelectenerg-384	128	8	120	120	NUM
fuelectenerg-384	128	9	l.	l.	PROPN
fuelectenerg-384	128	10	michalas	michalas	PROPN
fuelectenerg-384	128	11	,	,	PUNCT
fuelectenerg-384	128	12	m.	m.	PROPN
fuelectenerg-384	128	13	koutsoureli	koutsoureli	PROPN
fuelectenerg-384	128	14	,	,	PUNCT
fuelectenerg-384	128	15	e.	e.	PROPN
fuelectenerg-384	128	16	papandreou	papandreou	PROPN
fuelectenerg-384	128	17	,	,	PUNCT
fuelectenerg-384	128	18	a.	a.	PROPN
fuelectenerg-384	128	19	gantis	gantis	PROPN
fuelectenerg-384	128	20	,	,	PUNCT
fuelectenerg-384	128	21	g.	g.	PROPN
fuelectenerg-384	128	22	papaioannou	papaioannou	PROPN
fuelectenerg-384	128	23	3.4	3.4	NUM
fuelectenerg-384	128	24	.	.	PUNCT
fuelectenerg-384	129	1	discussion	discussion	NOUN
fuelectenerg-384	129	2	the	the	DET
fuelectenerg-384	129	3	analysis	analysis	NOUN
fuelectenerg-384	129	4	presented	present	VERB
fuelectenerg-384	129	5	in	in	ADP
fuelectenerg-384	129	6	the	the	DET
fuelectenerg-384	129	7	above	above	ADJ
fuelectenerg-384	129	8	sections	section	NOUN
fuelectenerg-384	129	9	confirms	confirm	VERB
fuelectenerg-384	129	10	that	that	SCONJ
fuelectenerg-384	129	11	the	the	DET
fuelectenerg-384	129	12	study	study	NOUN
fuelectenerg-384	129	13	of	of	ADP
fuelectenerg-384	129	14	the	the	DET
fuelectenerg-384	129	15	electrical	electrical	ADJ
fuelectenerg-384	129	16	properties	property	NOUN
fuelectenerg-384	129	17	of	of	ADP
fuelectenerg-384	129	18	mim	mim	PROPN
fuelectenerg-384	129	19	capacitor	capacitor	NOUN
fuelectenerg-384	129	20	provides	provide	VERB
fuelectenerg-384	129	21	valuable	valuable	ADJ
fuelectenerg-384	129	22	information	information	NOUN
fuelectenerg-384	129	23	on	on	ADP
fuelectenerg-384	129	24	the	the	DET
fuelectenerg-384	129	25	study	study	NOUN
fuelectenerg-384	129	26	of	of	ADP
fuelectenerg-384	129	27	dielectric	dielectric	ADJ
fuelectenerg-384	129	28	charging	charging	NOUN
fuelectenerg-384	129	29	for	for	ADP
fuelectenerg-384	129	30	rf	rf	VERB
fuelectenerg-384	129	31	mems	mem	NOUN
fuelectenerg-384	129	32	.	.	PUNCT
fuelectenerg-384	130	1	the	the	DET
fuelectenerg-384	130	2	analysis	analysis	NOUN
fuelectenerg-384	130	3	of	of	ADP
fuelectenerg-384	130	4	the	the	DET
fuelectenerg-384	130	5	dc	dc	PROPN
fuelectenerg-384	130	6	characteristics	characteristics	PROPN
fuelectenerg-384	130	7	reveals	reveal	VERB
fuelectenerg-384	130	8	the	the	DET
fuelectenerg-384	130	9	responsible	responsible	ADJ
fuelectenerg-384	130	10	mechanism	mechanism	NOUN
fuelectenerg-384	130	11	for	for	ADP
fuelectenerg-384	130	12	the	the	DET
fuelectenerg-384	130	13	charging	charging	NOUN
fuelectenerg-384	130	14	and	and	CCONJ
fuelectenerg-384	130	15	discharging	discharge	VERB
fuelectenerg-384	130	16	processes	process	NOUN
fuelectenerg-384	130	17	.	.	PUNCT
fuelectenerg-384	131	1	in	in	ADP
fuelectenerg-384	131	2	addition	addition	NOUN
fuelectenerg-384	131	3	,	,	PUNCT
fuelectenerg-384	131	4	taking	take	VERB
fuelectenerg-384	131	5	into	into	ADP
fuelectenerg-384	131	6	consideration	consideration	NOUN
fuelectenerg-384	131	7	the	the	DET
fuelectenerg-384	131	8	results	result	NOUN
fuelectenerg-384	131	9	extracted	extract	VERB
fuelectenerg-384	131	10	in	in	ADP
fuelectenerg-384	131	11	both	both	DET
fuelectenerg-384	131	12	devices	device	NOUN
fuelectenerg-384	131	13	after	after	ADP
fuelectenerg-384	131	14	charging	charge	VERB
fuelectenerg-384	131	15	up	up	ADP
fuelectenerg-384	131	16	to	to	ADP
fuelectenerg-384	131	17	the	the	DET
fuelectenerg-384	131	18	equivalent	equivalent	ADJ
fuelectenerg-384	131	19	stored	store	VERB
fuelectenerg-384	131	20	charge	charge	NOUN
fuelectenerg-384	131	21	(	(	PUNCT
fuelectenerg-384	131	22	table	table	NOUN
fuelectenerg-384	131	23	1	1	NUM
fuelectenerg-384	131	24	)	)	PUNCT
fuelectenerg-384	131	25	,	,	PUNCT
fuelectenerg-384	131	26	we	we	PRON
fuelectenerg-384	131	27	may	may	AUX
fuelectenerg-384	131	28	conclude	conclude	VERB
fuelectenerg-384	131	29	that	that	SCONJ
fuelectenerg-384	131	30	the	the	DET
fuelectenerg-384	131	31	main	main	ADJ
fuelectenerg-384	131	32	drawback	drawback	NOUN
fuelectenerg-384	131	33	of	of	ADP
fuelectenerg-384	131	34	using	use	VERB
fuelectenerg-384	131	35	a	a	DET
fuelectenerg-384	131	36	mim	mim	PROPN
fuelectenerg-384	131	37	capacitor	capacitor	NOUN
fuelectenerg-384	131	38	for	for	ADP
fuelectenerg-384	131	39	the	the	DET
fuelectenerg-384	131	40	study	study	NOUN
fuelectenerg-384	131	41	of	of	ADP
fuelectenerg-384	131	42	mems	mem	NOUN
fuelectenerg-384	131	43	arise	arise	VERB
fuelectenerg-384	131	44	by	by	ADP
fuelectenerg-384	131	45	the	the	DET
fuelectenerg-384	131	46	differences	difference	NOUN
fuelectenerg-384	131	47	in	in	ADP
fuelectenerg-384	131	48	the	the	DET
fuelectenerg-384	131	49	top	top	ADJ
fuelectenerg-384	131	50	metal	metal	NOUN
fuelectenerg-384	131	51	/	/	SYM
fuelectenerg-384	131	52	dielectric	dielectric	ADJ
fuelectenerg-384	131	53	contact	contact	NOUN
fuelectenerg-384	131	54	.	.	PUNCT
fuelectenerg-384	132	1	table	table	NOUN
fuelectenerg-384	132	2	1	1	NUM
fuelectenerg-384	132	3	summary	summary	NOUN
fuelectenerg-384	132	4	of	of	ADP
fuelectenerg-384	132	5	the	the	DET
fuelectenerg-384	132	6	results	result	NOUN
fuelectenerg-384	132	7	for	for	ADP
fuelectenerg-384	132	8	the	the	DET
fuelectenerg-384	132	9	discharge	discharge	NOUN
fuelectenerg-384	132	10	in	in	ADP
fuelectenerg-384	132	11	mems	mem	NOUN
fuelectenerg-384	132	12	and	and	CCONJ
fuelectenerg-384	132	13	mim	mim	PROPN
fuelectenerg-384	132	14	250	250	NUM
fuelectenerg-384	132	15	nm	nm	PROPN
fuelectenerg-384	132	16	sin	sin	NOUN
fuelectenerg-384	132	17	mim	mim	PROPN
fuelectenerg-384	132	18	mems	mem	NOUN
fuelectenerg-384	132	19	stored	store	VERB
fuelectenerg-384	132	20	charge	charge	NOUN
fuelectenerg-384	132	21	(	(	PUNCT
fuelectenerg-384	132	22	nc	nc	PROPN
fuelectenerg-384	132	23	/	/	SYM
fuelectenerg-384	132	24	cm	cm	NOUN
fuelectenerg-384	132	25	2	2	NUM
fuelectenerg-384	132	26	)	)	PUNCT
fuelectenerg-384	132	27	30	30	NUM
fuelectenerg-384	132	28	30	30	NUM
fuelectenerg-384	132	29	top	top	ADJ
fuelectenerg-384	132	30	surface	surface	NOUN
fuelectenerg-384	132	31	potential	potential	ADJ
fuelectenerg-384	132	32	relaxation	relaxation	NOUN
fuelectenerg-384	132	33	stretched	stretch	VERB
fuelectenerg-384	132	34	exp	exp	NOUN
fuelectenerg-384	132	35	.	.	PROPN
fuelectenerg-384	132	36	stretched	stretch	VERB
fuelectenerg-384	132	37	exp	exp	NOUN
fuelectenerg-384	132	38	.	.	PUNCT
fuelectenerg-384	133	1	relaxation	relaxation	NOUN
fuelectenerg-384	133	2	time	time	NOUN
fuelectenerg-384	133	3	(	(	PUNCT
fuelectenerg-384	133	4	sec	sec	PROPN
fuelectenerg-384	133	5	)	)	PUNCT
fuelectenerg-384	133	6	5	5	NUM
fuelectenerg-384	133	7	x10	x10	ADP
fuelectenerg-384	133	8	4	4	NUM
fuelectenerg-384	133	9	3	3	NUM
fuelectenerg-384	133	10	x	x	SYM
fuelectenerg-384	133	11	10	10	NUM
fuelectenerg-384	133	12	4	4	NUM
fuelectenerg-384	133	13	exponent	exponent	NOUN
fuelectenerg-384	133	14	β	β	VERB
fuelectenerg-384	133	15	0.9	0.9	NUM
fuelectenerg-384	133	16	0.4	0.4	NUM
fuelectenerg-384	133	17	the	the	DET
fuelectenerg-384	133	18	table	table	NOUN
fuelectenerg-384	133	19	summarizes	summarize	VERB
fuelectenerg-384	133	20	the	the	DET
fuelectenerg-384	133	21	results	result	NOUN
fuelectenerg-384	133	22	for	for	ADP
fuelectenerg-384	133	23	the	the	DET
fuelectenerg-384	133	24	discharge	discharge	NOUN
fuelectenerg-384	133	25	relaxation	relaxation	NOUN
fuelectenerg-384	133	26	time	time	NOUN
fuelectenerg-384	133	27	(	(	PUNCT
fuelectenerg-384	133	28	τ	τ	X
fuelectenerg-384	133	29	)	)	PUNCT
fuelectenerg-384	133	30	and	and	CCONJ
fuelectenerg-384	133	31	the	the	DET
fuelectenerg-384	133	32	stretched	stretch	VERB
fuelectenerg-384	133	33	factor	factor	NOUN
fuelectenerg-384	133	34	(	(	PUNCT
fuelectenerg-384	133	35	β	β	NOUN
fuelectenerg-384	133	36	)	)	PUNCT
fuelectenerg-384	133	37	obtained	obtain	VERB
fuelectenerg-384	133	38	by	by	ADP
fuelectenerg-384	133	39	fitting	fitting	ADJ
fuelectenerg-384	133	40	procedure	procedure	NOUN
fuelectenerg-384	133	41	with	with	ADP
fuelectenerg-384	133	42	the	the	DET
fuelectenerg-384	133	43	stretched	stretch	VERB
fuelectenerg-384	133	44	exponential	exponential	ADJ
fuelectenerg-384	133	45	relaxation	relaxation	NOUN
fuelectenerg-384	133	46	law	law	NOUN
fuelectenerg-384	133	47	on	on	ADP
fuelectenerg-384	133	48	experimental	experimental	ADJ
fuelectenerg-384	133	49	data	datum	NOUN
fuelectenerg-384	133	50	obtained	obtain	VERB
fuelectenerg-384	133	51	in	in	ADP
fuelectenerg-384	133	52	mim	mim	PROPN
fuelectenerg-384	133	53	capacitors	capacitor	NOUN
fuelectenerg-384	133	54	and	and	CCONJ
fuelectenerg-384	133	55	mems	mem	NOUN
fuelectenerg-384	133	56	switches	switch	NOUN
fuelectenerg-384	133	57	.	.	PUNCT
fuelectenerg-384	134	1	the	the	DET
fuelectenerg-384	134	2	absence	absence	NOUN
fuelectenerg-384	134	3	of	of	ADP
fuelectenerg-384	134	4	air	air	NOUN
fuelectenerg-384	134	5	gaps	gap	NOUN
fuelectenerg-384	134	6	in	in	ADP
fuelectenerg-384	134	7	case	case	NOUN
fuelectenerg-384	134	8	of	of	ADP
fuelectenerg-384	134	9	mim	mim	PROPN
fuelectenerg-384	134	10	capacitors	capacitor	NOUN
fuelectenerg-384	134	11	results	result	VERB
fuelectenerg-384	134	12	in	in	ADP
fuelectenerg-384	134	13	a	a	DET
fuelectenerg-384	134	14	uniform	uniform	ADJ
fuelectenerg-384	134	15	distribution	distribution	NOUN
fuelectenerg-384	134	16	of	of	ADP
fuelectenerg-384	134	17	injected	inject	VERB
fuelectenerg-384	134	18	charges	charge	NOUN
fuelectenerg-384	134	19	.	.	PUNCT
fuelectenerg-384	135	1	therefore	therefore	ADV
fuelectenerg-384	135	2	,	,	PUNCT
fuelectenerg-384	135	3	even	even	ADV
fuelectenerg-384	135	4	if	if	SCONJ
fuelectenerg-384	135	5	the	the	DET
fuelectenerg-384	135	6	same	same	ADJ
fuelectenerg-384	135	7	charge	charge	NOUN
fuelectenerg-384	135	8	density	density	NOUN
fuelectenerg-384	135	9	is	be	AUX
fuelectenerg-384	135	10	injected	inject	VERB
fuelectenerg-384	135	11	,	,	PUNCT
fuelectenerg-384	135	12	the	the	DET
fuelectenerg-384	135	13	resulting	result	VERB
fuelectenerg-384	135	14	internal	internal	ADJ
fuelectenerg-384	135	15	field	field	NOUN
fuelectenerg-384	135	16	is	be	AUX
fuelectenerg-384	135	17	different	different	ADJ
fuelectenerg-384	135	18	in	in	ADP
fuelectenerg-384	135	19	the	the	DET
fuelectenerg-384	135	20	two	two	NUM
fuelectenerg-384	135	21	cases	case	NOUN
fuelectenerg-384	135	22	.	.	PUNCT
fuelectenerg-384	136	1	in	in	ADP
fuelectenerg-384	136	2	mems	mem	NOUN
fuelectenerg-384	136	3	,	,	PUNCT
fuelectenerg-384	136	4	the	the	DET
fuelectenerg-384	136	5	internal	internal	ADJ
fuelectenerg-384	136	6	field	field	NOUN
fuelectenerg-384	136	7	is	be	AUX
fuelectenerg-384	136	8	expected	expect	VERB
fuelectenerg-384	136	9	to	to	PART
fuelectenerg-384	136	10	be	be	AUX
fuelectenerg-384	136	11	strongly	strongly	ADV
fuelectenerg-384	136	12	non	non	ADJ
fuelectenerg-384	136	13	uniform	uniform	NOUN
fuelectenerg-384	136	14	resulting	result	VERB
fuelectenerg-384	136	15	in	in	ADP
fuelectenerg-384	136	16	locally	locally	ADV
fuelectenerg-384	136	17	enhanced	enhance	VERB
fuelectenerg-384	136	18	densities	density	NOUN
fuelectenerg-384	136	19	.	.	PUNCT
fuelectenerg-384	137	1	these	these	DET
fuelectenerg-384	137	2	fluctuations	fluctuation	NOUN
fuelectenerg-384	137	3	are	be	AUX
fuelectenerg-384	137	4	responsible	responsible	ADJ
fuelectenerg-384	137	5	for	for	ADP
fuelectenerg-384	137	6	the	the	DET
fuelectenerg-384	137	7	slight	slight	ADJ
fuelectenerg-384	137	8	differences	difference	NOUN
fuelectenerg-384	137	9	extracted	extract	VERB
fuelectenerg-384	137	10	from	from	ADP
fuelectenerg-384	137	11	the	the	DET
fuelectenerg-384	137	12	discharging	discharging	NOUN
fuelectenerg-384	137	13	process	process	NOUN
fuelectenerg-384	137	14	.	.	PUNCT
fuelectenerg-384	138	1	the	the	DET
fuelectenerg-384	138	2	uniform	uniform	ADJ
fuelectenerg-384	138	3	internal	internal	ADJ
fuelectenerg-384	138	4	field	field	NOUN
fuelectenerg-384	138	5	that	that	PRON
fuelectenerg-384	138	6	is	be	AUX
fuelectenerg-384	138	7	formed	form	VERB
fuelectenerg-384	138	8	in	in	ADP
fuelectenerg-384	138	9	the	the	DET
fuelectenerg-384	138	10	case	case	NOUN
fuelectenerg-384	138	11	of	of	ADP
fuelectenerg-384	138	12	mim	mim	PROPN
fuelectenerg-384	138	13	results	result	NOUN
fuelectenerg-384	138	14	in	in	ADP
fuelectenerg-384	138	15	slower	slow	ADJ
fuelectenerg-384	138	16	discharging	discharging	NOUN
fuelectenerg-384	138	17	while	while	SCONJ
fuelectenerg-384	138	18	the	the	DET
fuelectenerg-384	138	19	non	non	ADJ
fuelectenerg-384	138	20	uniformity	uniformity	NOUN
fuelectenerg-384	138	21	in	in	ADP
fuelectenerg-384	138	22	case	case	NOUN
fuelectenerg-384	138	23	of	of	ADP
fuelectenerg-384	138	24	mems	mem	NOUN
fuelectenerg-384	138	25	is	be	AUX
fuelectenerg-384	138	26	also	also	ADV
fuelectenerg-384	138	27	expressed	express	VERB
fuelectenerg-384	138	28	by	by	ADP
fuelectenerg-384	138	29	the	the	DET
fuelectenerg-384	138	30	reduced	reduce	VERB
fuelectenerg-384	138	31	values	value	NOUN
fuelectenerg-384	138	32	of	of	ADP
fuelectenerg-384	138	33	the	the	DET
fuelectenerg-384	138	34	stretched	stretch	VERB
fuelectenerg-384	138	35	exponential	exponential	ADJ
fuelectenerg-384	138	36	exponent	exponent	NOUN
fuelectenerg-384	138	37	β	β	NOUN
fuelectenerg-384	138	38	.	.	PUNCT
fuelectenerg-384	139	1	in	in	ADP
fuelectenerg-384	139	2	this	this	DET
fuelectenerg-384	139	3	point	point	NOUN
fuelectenerg-384	139	4	it	it	PRON
fuelectenerg-384	139	5	is	be	AUX
fuelectenerg-384	139	6	worth	worth	ADJ
fuelectenerg-384	139	7	to	to	PART
fuelectenerg-384	139	8	point	point	VERB
fuelectenerg-384	139	9	out	out	ADP
fuelectenerg-384	139	10	that	that	SCONJ
fuelectenerg-384	139	11	the	the	DET
fuelectenerg-384	139	12	stretched	stretch	VERB
fuelectenerg-384	139	13	exponential	exponential	ADJ
fuelectenerg-384	139	14	relaxation	relaxation	NOUN
fuelectenerg-384	139	15	although	although	SCONJ
fuelectenerg-384	139	16	appearing	appear	VERB
fuelectenerg-384	139	17	to	to	PART
fuelectenerg-384	139	18	be	be	AUX
fuelectenerg-384	139	19	a	a	DET
fuelectenerg-384	139	20	fitting	fitting	ADJ
fuelectenerg-384	139	21	tool	tool	NOUN
fuelectenerg-384	139	22	without	without	ADP
fuelectenerg-384	139	23	significant	significant	ADJ
fuelectenerg-384	139	24	physical	physical	ADJ
fuelectenerg-384	139	25	meaning	meaning	NOUN
fuelectenerg-384	139	26	,	,	PUNCT
fuelectenerg-384	139	27	arises	arise	VERB
fuelectenerg-384	139	28	from	from	ADP
fuelectenerg-384	139	29	the	the	DET
fuelectenerg-384	139	30	superposition	superposition	NOUN
fuelectenerg-384	139	31	of	of	ADP
fuelectenerg-384	139	32	many	many	ADJ
fuelectenerg-384	139	33	single	single	ADJ
fuelectenerg-384	139	34	exponentials	exponential	NOUN
fuelectenerg-384	139	35	relaxation	relaxation	NOUN
fuelectenerg-384	139	36	processes	process	NOUN
fuelectenerg-384	139	37	and	and	CCONJ
fuelectenerg-384	139	38	is	be	AUX
fuelectenerg-384	139	39	multiscale	multiscale	ADJ
fuelectenerg-384	139	40	in	in	ADP
fuelectenerg-384	139	41	contrast	contrast	NOUN
fuelectenerg-384	139	42	to	to	ADP
fuelectenerg-384	139	43	debye	debye	ADJ
fuelectenerg-384	139	44	relaxation	relaxation	NOUN
fuelectenerg-384	139	45	[	[	X
fuelectenerg-384	139	46	27	27	NUM
fuelectenerg-384	139	47	]	]	PUNCT
fuelectenerg-384	139	48	.	.	PUNCT
fuelectenerg-384	140	1	therefore	therefore	ADV
fuelectenerg-384	140	2	,	,	PUNCT
fuelectenerg-384	140	3	in	in	ADP
fuelectenerg-384	140	4	the	the	DET
fuelectenerg-384	140	5	case	case	NOUN
fuelectenerg-384	140	6	of	of	ADP
fuelectenerg-384	140	7	amorphous	amorphous	ADJ
fuelectenerg-384	140	8	dielectric	dielectric	ADJ
fuelectenerg-384	140	9	films	film	NOUN
fuelectenerg-384	140	10	for	for	ADP
fuelectenerg-384	140	11	mems	mems	ADJ
fuelectenerg-384	140	12	application	application	NOUN
fuelectenerg-384	140	13	,	,	PUNCT
fuelectenerg-384	140	14	the	the	DET
fuelectenerg-384	140	15	stretched	stretch	VERB
fuelectenerg-384	140	16	factor	factor	NOUN
fuelectenerg-384	140	17	β	β	X
fuelectenerg-384	140	18	is	be	AUX
fuelectenerg-384	140	19	used	use	VERB
fuelectenerg-384	140	20	as	as	ADP
fuelectenerg-384	140	21	an	an	DET
fuelectenerg-384	140	22	indicator	indicator	NOUN
fuelectenerg-384	140	23	of	of	ADP
fuelectenerg-384	140	24	the	the	DET
fuelectenerg-384	140	25	complexity	complexity	NOUN
fuelectenerg-384	140	26	of	of	ADP
fuelectenerg-384	140	27	the	the	DET
fuelectenerg-384	140	28	charge	charge	NOUN
fuelectenerg-384	140	29	collection	collection	NOUN
fuelectenerg-384	140	30	process	process	NOUN
fuelectenerg-384	140	31	[	[	X
fuelectenerg-384	140	32	28	28	NUM
fuelectenerg-384	140	33	]	]	PUNCT
fuelectenerg-384	140	34	and	and	CCONJ
fuelectenerg-384	140	35	is	be	AUX
fuelectenerg-384	140	36	mainly	mainly	ADV
fuelectenerg-384	140	37	determined	determine	VERB
fuelectenerg-384	140	38	by	by	ADP
fuelectenerg-384	140	39	the	the	DET
fuelectenerg-384	140	40	charge	charge	NOUN
fuelectenerg-384	140	41	distribution	distribution	NOUN
fuelectenerg-384	140	42	formed	form	VERB
fuelectenerg-384	140	43	at	at	ADP
fuelectenerg-384	140	44	the	the	DET
fuelectenerg-384	140	45	film	film	NOUN
fuelectenerg-384	140	46	surface	surface	NOUN
fuelectenerg-384	140	47	by	by	ADP
fuelectenerg-384	140	48	the	the	DET
fuelectenerg-384	140	49	charging	charge	VERB
fuelectenerg-384	140	50	process	process	NOUN
fuelectenerg-384	140	51	[	[	X
fuelectenerg-384	140	52	14	14	NUM
fuelectenerg-384	140	53	]	]	PUNCT
fuelectenerg-384	140	54	.	.	PUNCT
fuelectenerg-384	141	1	therefore	therefore	ADV
fuelectenerg-384	141	2	,	,	PUNCT
fuelectenerg-384	141	3	the	the	DET
fuelectenerg-384	141	4	study	study	NOUN
fuelectenerg-384	141	5	of	of	ADP
fuelectenerg-384	141	6	mim	mim	PROPN
fuelectenerg-384	141	7	may	may	AUX
fuelectenerg-384	141	8	provide	provide	VERB
fuelectenerg-384	141	9	the	the	DET
fuelectenerg-384	141	10	expected	expect	VERB
fuelectenerg-384	141	11	magnitude	magnitude	NOUN
fuelectenerg-384	141	12	in	in	ADP
fuelectenerg-384	141	13	the	the	DET
fuelectenerg-384	141	14	discharging	discharge	VERB
fuelectenerg-384	141	15	time	time	NOUN
fuelectenerg-384	141	16	constant	constant	ADJ
fuelectenerg-384	141	17	for	for	ADP
fuelectenerg-384	141	18	mems	mem	NOUN
fuelectenerg-384	141	19	,	,	PUNCT
fuelectenerg-384	141	20	however	however	ADV
fuelectenerg-384	141	21	different	different	ADJ
fuelectenerg-384	141	22	shapes	shape	NOUN
fuelectenerg-384	141	23	on	on	ADP
fuelectenerg-384	141	24	the	the	DET
fuelectenerg-384	141	25	discharging	discharge	VERB
fuelectenerg-384	141	26	curves	curve	NOUN
fuelectenerg-384	141	27	and	and	CCONJ
fuelectenerg-384	141	28	mainly	mainly	ADV
fuelectenerg-384	141	29	in	in	ADP
fuelectenerg-384	141	30	curve	curve	NOUN
fuelectenerg-384	141	31	’s	’s	PART
fuelectenerg-384	141	32	tails	tail	NOUN
fuelectenerg-384	141	33	for	for	ADP
fuelectenerg-384	141	34	long	long	ADJ
fuelectenerg-384	141	35	times	time	NOUN
fuelectenerg-384	141	36	should	should	AUX
fuelectenerg-384	141	37	always	always	ADV
fuelectenerg-384	141	38	been	be	AUX
fuelectenerg-384	141	39	expected	expect	VERB
fuelectenerg-384	141	40	.	.	PUNCT
fuelectenerg-384	142	1	in	in	ADP
fuelectenerg-384	142	2	addition	addition	NOUN
fuelectenerg-384	142	3	,	,	PUNCT
fuelectenerg-384	142	4	the	the	DET
fuelectenerg-384	142	5	charging	charge	VERB
fuelectenerg-384	142	6	study	study	NOUN
fuelectenerg-384	142	7	in	in	ADP
fuelectenerg-384	142	8	mim	mim	PROPN
fuelectenerg-384	142	9	can	can	AUX
fuelectenerg-384	142	10	not	not	PART
fuelectenerg-384	142	11	predict	predict	VERB
fuelectenerg-384	142	12	any	any	DET
fuelectenerg-384	142	13	effect	effect	NOUN
fuelectenerg-384	142	14	arising	arise	VERB
fuelectenerg-384	142	15	by	by	ADP
fuelectenerg-384	142	16	the	the	DET
fuelectenerg-384	142	17	non	non	ADJ
fuelectenerg-384	142	18	uniform	uniform	PROPN
fuelectenerg-384	142	19	charge	charge	NOUN
fuelectenerg-384	142	20	injection	injection	NOUN
fuelectenerg-384	142	21	such	such	ADJ
fuelectenerg-384	142	22	as	as	ADP
fuelectenerg-384	142	23	the	the	DET
fuelectenerg-384	142	24	narrowing	narrowing	NOUN
fuelectenerg-384	142	25	of	of	ADP
fuelectenerg-384	142	26	pull	pull	NOUN
fuelectenerg-384	142	27	-	-	PUNCT
fuelectenerg-384	142	28	in	in	ADP
fuelectenerg-384	142	29	/	/	SYM
fuelectenerg-384	142	30	out	out	NOUN
fuelectenerg-384	142	31	window	window	NOUN
fuelectenerg-384	142	32	[	[	X
fuelectenerg-384	142	33	8,9	8,9	NUM
fuelectenerg-384	142	34	]	]	PUNCT
fuelectenerg-384	142	35	.	.	PUNCT
fuelectenerg-384	143	1	4	4	X
fuelectenerg-384	143	2	.	.	X
fuelectenerg-384	143	3	conclusions	conclusion	NOUN
fuelectenerg-384	143	4	the	the	DET
fuelectenerg-384	143	5	paper	paper	NOUN
fuelectenerg-384	143	6	presents	present	VERB
fuelectenerg-384	143	7	an	an	DET
fuelectenerg-384	143	8	approach	approach	NOUN
fuelectenerg-384	143	9	for	for	ADP
fuelectenerg-384	143	10	the	the	DET
fuelectenerg-384	143	11	assessment	assessment	NOUN
fuelectenerg-384	143	12	of	of	ADP
fuelectenerg-384	143	13	dielectric	dielectric	ADJ
fuelectenerg-384	143	14	charging	charging	NOUN
fuelectenerg-384	143	15	in	in	ADP
fuelectenerg-384	143	16	rf	rf	NOUN
fuelectenerg-384	143	17	mems	mem	NOUN
fuelectenerg-384	143	18	capacitive	capacitive	ADJ
fuelectenerg-384	143	19	switches	switch	NOUN
fuelectenerg-384	143	20	with	with	ADP
fuelectenerg-384	143	21	the	the	DET
fuelectenerg-384	143	22	aid	aid	NOUN
fuelectenerg-384	143	23	of	of	ADP
fuelectenerg-384	143	24	mim	mim	PROPN
fuelectenerg-384	143	25	capacitors	capacitor	NOUN
fuelectenerg-384	143	26	.	.	PUNCT
fuelectenerg-384	144	1	the	the	DET
fuelectenerg-384	144	2	study	study	NOUN
fuelectenerg-384	144	3	involved	involve	VERB
fuelectenerg-384	144	4	the	the	DET
fuelectenerg-384	144	5	dc	dc	PROPN
fuelectenerg-384	144	6	analysis	analysis	NOUN
fuelectenerg-384	144	7	,	,	PUNCT
fuelectenerg-384	144	8	charging	charge	VERB
fuelectenerg-384	144	9	current	current	ADJ
fuelectenerg-384	144	10	transients	transient	NOUN
fuelectenerg-384	144	11	(	(	PUNCT
fuelectenerg-384	144	12	cct	cct	NOUN
fuelectenerg-384	144	13	)	)	PUNCT
fuelectenerg-384	144	14	and	and	CCONJ
fuelectenerg-384	144	15	kelvin	kelvin	PROPN
fuelectenerg-384	144	16	probe	probe	PROPN
fuelectenerg-384	144	17	.	.	PUNCT
fuelectenerg-384	145	1	the	the	DET
fuelectenerg-384	145	2	strengths	strength	NOUN
fuelectenerg-384	145	3	and	and	CCONJ
fuelectenerg-384	145	4	weaknesses	weakness	NOUN
fuelectenerg-384	145	5	of	of	ADP
fuelectenerg-384	145	6	each	each	DET
fuelectenerg-384	145	7	a	a	DET
fuelectenerg-384	145	8	mim	mim	PROPN
fuelectenerg-384	145	9	capacitor	capacitor	NOUN
fuelectenerg-384	145	10	study	study	NOUN
fuelectenerg-384	145	11	of	of	ADP
fuelectenerg-384	145	12	dielectric	dielectric	ADJ
fuelectenerg-384	145	13	charging	charging	NOUN
fuelectenerg-384	145	14	for	for	ADP
fuelectenerg-384	145	15	rf	rf	VERB
fuelectenerg-384	145	16	mems	mem	NOUN
fuelectenerg-384	145	17	capacitive	capacitive	ADJ
fuelectenerg-384	145	18	switches	switch	NOUN
fuelectenerg-384	145	19	121	121	NUM
fuelectenerg-384	145	20	technique	technique	NOUN
fuelectenerg-384	145	21	are	be	AUX
fuelectenerg-384	145	22	discussed	discuss	VERB
fuelectenerg-384	145	23	.	.	PUNCT
fuelectenerg-384	146	1	the	the	DET
fuelectenerg-384	146	2	dc	dc	PROPN
fuelectenerg-384	146	3	study	study	NOUN
fuelectenerg-384	146	4	of	of	ADP
fuelectenerg-384	146	5	mim	mim	PROPN
fuelectenerg-384	146	6	provided	provide	VERB
fuelectenerg-384	146	7	valuable	valuable	ADJ
fuelectenerg-384	146	8	information	information	NOUN
fuelectenerg-384	146	9	on	on	ADP
fuelectenerg-384	146	10	the	the	DET
fuelectenerg-384	146	11	responsible	responsible	ADJ
fuelectenerg-384	146	12	mechanisms	mechanism	NOUN
fuelectenerg-384	146	13	for	for	ADP
fuelectenerg-384	146	14	the	the	DET
fuelectenerg-384	146	15	charging	charging	NOUN
fuelectenerg-384	146	16	and	and	CCONJ
fuelectenerg-384	146	17	discharging	discharge	VERB
fuelectenerg-384	146	18	processes	process	NOUN
fuelectenerg-384	146	19	while	while	SCONJ
fuelectenerg-384	146	20	the	the	DET
fuelectenerg-384	146	21	kelvin	kelvin	PROPN
fuelectenerg-384	146	22	probe	probe	PROPN
fuelectenerg-384	146	23	technique	technique	NOUN
fuelectenerg-384	146	24	provided	provide	VERB
fuelectenerg-384	146	25	a	a	DET
fuelectenerg-384	146	26	quite	quite	ADV
fuelectenerg-384	146	27	realistic	realistic	ADJ
fuelectenerg-384	146	28	estimation	estimation	NOUN
fuelectenerg-384	146	29	of	of	ADP
fuelectenerg-384	146	30	the	the	DET
fuelectenerg-384	146	31	discharging	discharging	NOUN
fuelectenerg-384	146	32	time	time	NOUN
fuelectenerg-384	146	33	.	.	PUNCT
fuelectenerg-384	147	1	on	on	ADP
fuelectenerg-384	147	2	the	the	DET
fuelectenerg-384	147	3	other	other	ADJ
fuelectenerg-384	147	4	hand	hand	NOUN
fuelectenerg-384	147	5	,	,	PUNCT
fuelectenerg-384	147	6	the	the	DET
fuelectenerg-384	147	7	perfect	perfect	ADJ
fuelectenerg-384	147	8	mim	mim	PROPN
fuelectenerg-384	147	9	contact	contact	NOUN
fuelectenerg-384	147	10	leads	lead	VERB
fuelectenerg-384	147	11	to	to	ADP
fuelectenerg-384	147	12	enhanced	enhanced	ADJ
fuelectenerg-384	147	13	and	and	CCONJ
fuelectenerg-384	147	14	uniform	uniform	ADJ
fuelectenerg-384	147	15	charge	charge	NOUN
fuelectenerg-384	147	16	injection	injection	NOUN
fuelectenerg-384	147	17	,	,	PUNCT
fuelectenerg-384	147	18	thus	thus	ADV
fuelectenerg-384	147	19	the	the	DET
fuelectenerg-384	147	20	effects	effect	NOUN
fuelectenerg-384	147	21	related	relate	VERB
fuelectenerg-384	147	22	to	to	ADP
fuelectenerg-384	147	23	the	the	DET
fuelectenerg-384	147	24	non	non	ADJ
fuelectenerg-384	147	25	uniform	uniform	NOUN
fuelectenerg-384	147	26	charging	charge	VERB
fuelectenerg-384	147	27	arising	arise	VERB
fuelectenerg-384	147	28	mainly	mainly	ADV
fuelectenerg-384	147	29	by	by	ADP
fuelectenerg-384	147	30	the	the	DET
fuelectenerg-384	147	31	surface	surface	NOUN
fuelectenerg-384	147	32	roughness	roughness	NOUN
fuelectenerg-384	147	33	of	of	ADP
fuelectenerg-384	147	34	the	the	DET
fuelectenerg-384	147	35	dielectric	dielectric	ADJ
fuelectenerg-384	147	36	film	film	NOUN
fuelectenerg-384	147	37	can	can	AUX
fuelectenerg-384	147	38	not	not	PART
fuelectenerg-384	147	39	be	be	AUX
fuelectenerg-384	147	40	predicted	predict	VERB
fuelectenerg-384	147	41	.	.	PUNCT
fuelectenerg-384	148	1	therefore	therefore	ADV
fuelectenerg-384	148	2	,	,	PUNCT
fuelectenerg-384	148	3	minor	minor	ADJ
fuelectenerg-384	148	4	differences	difference	NOUN
fuelectenerg-384	148	5	in	in	ADP
fuelectenerg-384	148	6	the	the	DET
fuelectenerg-384	148	7	case	case	NOUN
fuelectenerg-384	148	8	of	of	ADP
fuelectenerg-384	148	9	mems	mem	NOUN
fuelectenerg-384	148	10	discharging	discharging	NOUN
fuelectenerg-384	148	11	process	process	NOUN
fuelectenerg-384	148	12	should	should	AUX
fuelectenerg-384	148	13	not	not	PART
fuelectenerg-384	148	14	be	be	AUX
fuelectenerg-384	148	15	considered	consider	VERB
fuelectenerg-384	148	16	as	as	ADP
fuelectenerg-384	148	17	unexpected	unexpected	ADJ
fuelectenerg-384	148	18	results	result	NOUN
fuelectenerg-384	148	19	.	.	PUNCT
fuelectenerg-384	149	1	conclusively	conclusively	ADV
fuelectenerg-384	149	2	,	,	PUNCT
fuelectenerg-384	149	3	it	it	PRON
fuelectenerg-384	149	4	is	be	AUX
fuelectenerg-384	149	5	presented	present	VERB
fuelectenerg-384	149	6	that	that	SCONJ
fuelectenerg-384	149	7	the	the	DET
fuelectenerg-384	149	8	appropriate	appropriate	ADJ
fuelectenerg-384	149	9	use	use	NOUN
fuelectenerg-384	149	10	of	of	ADP
fuelectenerg-384	149	11	mim	mim	PROPN
fuelectenerg-384	149	12	capacitor	capacitor	NOUN
fuelectenerg-384	149	13	constitutes	constitute	VERB
fuelectenerg-384	149	14	a	a	DET
fuelectenerg-384	149	15	useful	useful	ADJ
fuelectenerg-384	149	16	and	and	CCONJ
fuelectenerg-384	149	17	important	important	ADJ
fuelectenerg-384	149	18	tool	tool	NOUN
fuelectenerg-384	149	19	on	on	ADP
fuelectenerg-384	149	20	the	the	DET
fuelectenerg-384	149	21	study	study	NOUN
fuelectenerg-384	149	22	of	of	ADP
fuelectenerg-384	149	23	dielectric	dielectric	ADJ
fuelectenerg-384	149	24	charging	charging	NOUN
fuelectenerg-384	149	25	in	in	ADP
fuelectenerg-384	149	26	rf	rf	NOUN
fuelectenerg-384	149	27	mems	mem	NOUN
fuelectenerg-384	149	28	.	.	PUNCT
fuelectenerg-384	150	1	acknowledgement	acknowledgement	NOUN
fuelectenerg-384	150	2	:	:	PUNCT
fuelectenerg-384	150	3	the	the	DET
fuelectenerg-384	150	4	authors	author	NOUN
fuelectenerg-384	150	5	would	would	AUX
fuelectenerg-384	150	6	like	like	VERB
fuelectenerg-384	150	7	to	to	PART
fuelectenerg-384	150	8	acknowledge	acknowledge	VERB
fuelectenerg-384	150	9	that	that	SCONJ
fuelectenerg-384	150	10	the	the	DET
fuelectenerg-384	150	11	present	present	ADJ
fuelectenerg-384	150	12	work	work	NOUN
fuelectenerg-384	150	13	has	have	AUX
fuelectenerg-384	150	14	been	be	AUX
fuelectenerg-384	150	15	supported	support	VERB
fuelectenerg-384	150	16	by	by	ADP
fuelectenerg-384	150	17	the	the	DET
fuelectenerg-384	150	18	projects	project	NOUN
fuelectenerg-384	150	19	i	i	PRON
fuelectenerg-384	150	20	)	)	PUNCT
fuelectenerg-384	151	1	fp7	fp7	PROPN
fuelectenerg-384	151	2	eniac	eniac	PROPN
fuelectenerg-384	151	3	/	/	SYM
fuelectenerg-384	151	4	espa	espa	PROPN
fuelectenerg-384	151	5	-	-	PUNCT
fuelectenerg-384	151	6	gr“microsystem	gr“microsystem	NOUN
fuelectenerg-384	151	7	based	base	VERB
fuelectenerg-384	151	8	on	on	ADP
fuelectenerg-384	151	9	wide	wide	ADJ
fuelectenerg-384	151	10	band	band	NOUN
fuelectenerg-384	151	11	gap	gap	NOUN
fuelectenerg-384	151	12	materials	material	NOUN
fuelectenerg-384	151	13	miniaturized	miniaturize	VERB
fuelectenerg-384	151	14	and	and	CCONJ
fuelectenerg-384	151	15	nanostructured	nanostructure	VERB
fuelectenerg-384	151	16	rf	rf	NOUN
fuelectenerg-384	151	17	-	-	PUNCT
fuelectenerg-384	151	18	mems	mem	NOUN
fuelectenerg-384	151	19	”	"	PUNCT
fuelectenerg-384	151	20	nanocom	nanocom	NOUN
fuelectenerg-384	151	21	under	under	ADP
fuelectenerg-384	151	22	ga	ga	PROPN
fuelectenerg-384	151	23	:	:	PUNCT
fuelectenerg-384	151	24	270701	270701	NUM
fuelectenerg-384	151	25	-	-	SYM
fuelectenerg-384	151	26	2	2	NUM
fuelectenerg-384	151	27	,	,	PUNCT
fuelectenerg-384	151	28	eniac	eniac	NOUN
fuelectenerg-384	151	29	call	call	NOUN
fuelectenerg-384	151	30	3	3	NUM
fuelectenerg-384	151	31	and	and	CCONJ
fuelectenerg-384	151	32	ii)“nanostructured	ii)“nanostructure	VERB
fuelectenerg-384	151	33	materials	material	NOUN
fuelectenerg-384	151	34	and	and	CCONJ
fuelectenerg-384	151	35	rf	rf	NOUN
fuelectenerg-384	151	36	-	-	PUNCT
fuelectenerg-384	151	37	mems	mems	ADJ
fuelectenerg-384	151	38	rfic	rfic	ADJ
fuelectenerg-384	151	39	/	/	SYM
fuelectenerg-384	151	40	mmic	mmic	ADJ
fuelectenerg-384	151	41	technologies	technology	NOUN
fuelectenerg-384	151	42	for	for	ADP
fuelectenerg-384	151	43	highly	highly	ADV
fuelectenerg-384	151	44	adaptive	adaptive	ADJ
fuelectenerg-384	151	45	and	and	CCONJ
fuelectenerg-384	151	46	reliable	reliable	ADJ
fuelectenerg-384	151	47	rf	rf	ADJ
fuelectenerg-384	151	48	systems	system	NOUN
fuelectenerg-384	151	49	”	"	PUNCT
fuelectenerg-384	151	50	nanotec	nanotec	PROPN
fuelectenerg-384	151	51	under	under	ADP
fuelectenerg-384	151	52	ga	ga	PROPN
fuelectenerg-384	151	53	288531	288531	NUM
fuelectenerg-384	151	54	.	.	PUNCT
fuelectenerg-384	152	1	references	reference	NOUN
fuelectenerg-384	152	2	[	[	X
fuelectenerg-384	152	3	1	1	NUM
fuelectenerg-384	152	4	]	]	X
fuelectenerg-384	152	5	g.m	g.m	PROPN
fuelectenerg-384	152	6	.	.	PROPN
fuelectenerg-384	152	7	rebeiz	rebeiz	PROPN
fuelectenerg-384	152	8	,	,	PUNCT
fuelectenerg-384	152	9	rf	rf	NOUN
fuelectenerg-384	152	10	mems	mem	NOUN
fuelectenerg-384	152	11	:	:	PUNCT
fuelectenerg-384	152	12	theory	theory	NOUN
fuelectenerg-384	152	13	,	,	PUNCT
fuelectenerg-384	152	14	design	design	NOUN
fuelectenerg-384	152	15	and	and	CCONJ
fuelectenerg-384	152	16	technology	technology	NOUN
fuelectenerg-384	152	17	,	,	PUNCT
fuelectenerg-384	152	18	new	new	PROPN
fuelectenerg-384	152	19	york	york	PROPN
fuelectenerg-384	152	20	:	:	PUNCT
fuelectenerg-384	152	21	j.	j.	PROPN
fuelectenerg-384	152	22	wiley	wiley	PROPN
fuelectenerg-384	152	23	&	&	CCONJ
fuelectenerg-384	152	24	sons	son	NOUN
fuelectenerg-384	152	25	,	,	PUNCT
fuelectenerg-384	152	26	2003	2003	NUM
fuelectenerg-384	153	1	[	[	X
fuelectenerg-384	153	2	2	2	X
fuelectenerg-384	153	3	]	]	X
fuelectenerg-384	153	4	g.j	g.j	PROPN
fuelectenerg-384	153	5	.	.	PROPN
fuelectenerg-384	153	6	papaioannou	papaioannou	PROPN
fuelectenerg-384	153	7	,	,	PUNCT
fuelectenerg-384	153	8	g.	g.	PROPN
fuelectenerg-384	153	9	wang	wang	PROPN
fuelectenerg-384	153	10	,	,	PUNCT
fuelectenerg-384	153	11	d.	d.	PROPN
fuelectenerg-384	153	12	bessas	bessas	PROPN
fuelectenerg-384	153	13	,	,	PUNCT
fuelectenerg-384	153	14	j.	j.	PROPN
fuelectenerg-384	153	15	papapolymerou	papapolymerou	PROPN
fuelectenerg-384	153	16	“	"	PUNCT
fuelectenerg-384	153	17	contactless	contactless	ADJ
fuelectenerg-384	153	18	dielectric	dielectric	ADJ
fuelectenerg-384	153	19	charging	charge	VERB
fuelectenerg-384	153	20	mechanisms	mechanism	NOUN
fuelectenerg-384	153	21	in	in	ADP
fuelectenerg-384	153	22	rf	rf	ADJ
fuelectenerg-384	153	23	-	-	PUNCT
fuelectenerg-384	153	24	mems	mems	ADJ
fuelectenerg-384	153	25	capacitive	capacitive	ADJ
fuelectenerg-384	153	26	switches	switch	NOUN
fuelectenerg-384	153	27	”	"	PUNCT
fuelectenerg-384	153	28	1st	1st	ADJ
fuelectenerg-384	153	29	europ	europ	NOUN
fuelectenerg-384	153	30	.	.	PUNCT
fuelectenerg-384	154	1	microw	microw	NOUN
fuelectenerg-384	154	2	.	.	PUNCT
fuelectenerg-384	154	3	integrat	integrat	NOUN
fuelectenerg-384	154	4	.	.	PUNCT
fuelectenerg-384	155	1	circ	circ	PROPN
fuelectenerg-384	155	2	.	.	PUNCT
fuelectenerg-384	155	3	conf	conf	PROPN
fuelectenerg-384	155	4	.	.	PROPN
fuelectenerg-384	155	5	,	,	PUNCT
fuelectenerg-384	155	6	manchester	manchester	PROPN
fuelectenerg-384	155	7	uk	uk	PROPN
fuelectenerg-384	155	8	,	,	PUNCT
fuelectenerg-384	155	9	pp	pp	ADP
fuelectenerg-384	155	10	.	.	PUNCT
fuelectenerg-384	156	1	513516	513516	NUM
fuelectenerg-384	156	2	,	,	PUNCT
fuelectenerg-384	156	3	oct	oct	PROPN
fuelectenerg-384	156	4	.	.	PROPN
fuelectenerg-384	156	5	2006	2006	NUM
fuelectenerg-384	157	1	[	[	X
fuelectenerg-384	157	2	3	3	NUM
fuelectenerg-384	157	3	]	]	X
fuelectenerg-384	157	4	p.	p.	PROPN
fuelectenerg-384	157	5	czarnecki	czarnecki	PROPN
fuelectenerg-384	157	6	,	,	PUNCT
fuelectenerg-384	157	7	x.	x.	PROPN
fuelectenerg-384	157	8	rottenberg	rottenberg	PROPN
fuelectenerg-384	157	9	,	,	PUNCT
fuelectenerg-384	157	10	p.	p.	PROPN
fuelectenerg-384	157	11	soussan	soussan	NOUN
fuelectenerg-384	157	12	,	,	PUNCT
fuelectenerg-384	157	13	p.	p.	NOUN
fuelectenerg-384	157	14	ekkels	ekkel	NOUN
fuelectenerg-384	157	15	,	,	PUNCT
fuelectenerg-384	157	16	p.	p.	NOUN
fuelectenerg-384	157	17	muller	muller	NOUN
fuelectenerg-384	157	18	,	,	PUNCT
fuelectenerg-384	157	19	p.	p.	PROPN
fuelectenerg-384	157	20	nolmans	nolmans	PROPN
fuelectenerg-384	157	21	,	,	PUNCT
fuelectenerg-384	157	22	w.	w.	PROPN
fuelectenerg-384	157	23	de	de	PROPN
fuelectenerg-384	157	24	raedt	raedt	PROPN
fuelectenerg-384	157	25	,	,	PUNCT
fuelectenerg-384	157	26	h.a.c	h.a.c	NOUN
fuelectenerg-384	157	27	..	..	PUNCT
fuelectenerg-384	157	28	tilmans	tilman	NOUN
fuelectenerg-384	157	29	,	,	PUNCT
fuelectenerg-384	157	30	r.	r.	PROPN
fuelectenerg-384	157	31	puers	puers	PROPN
fuelectenerg-384	157	32	,	,	PUNCT
fuelectenerg-384	157	33	l.	l.	PROPN
fuelectenerg-384	157	34	marchand	marchand	PROPN
fuelectenerg-384	157	35	,	,	PUNCT
fuelectenerg-384	157	36	i.	i.	PROPN
fuelectenerg-384	157	37	de	de	PROPN
fuelectenerg-384	157	38	wolf	wolf	PROPN
fuelectenerg-384	157	39	“	"	PUNCT
fuelectenerg-384	157	40	influence	influence	NOUN
fuelectenerg-384	157	41	of	of	ADP
fuelectenerg-384	157	42	the	the	DET
fuelectenerg-384	157	43	substrate	substrate	NOUN
fuelectenerg-384	157	44	on	on	ADP
fuelectenerg-384	157	45	the	the	DET
fuelectenerg-384	157	46	lifetime	lifetime	NOUN
fuelectenerg-384	157	47	of	of	ADP
fuelectenerg-384	157	48	capacitive	capacitive	ADJ
fuelectenerg-384	157	49	rf	rf	ADJ
fuelectenerg-384	157	50	mems	mem	NOUN
fuelectenerg-384	157	51	switches	switch	NOUN
fuelectenerg-384	157	52	”	"	PUNCT
fuelectenerg-384	157	53	in	in	ADP
fuelectenerg-384	157	54	proc	proc	NOUN
fuelectenerg-384	157	55	.	.	PUNCT
fuelectenerg-384	158	1	21st	21st	ADJ
fuelectenerg-384	158	2	ieee	ieee	PROPN
fuelectenerg-384	158	3	international	international	PROPN
fuelectenerg-384	158	4	conference	conference	PROPN
fuelectenerg-384	158	5	on	on	ADP
fuelectenerg-384	158	6	micro	micro	X
fuelectenerg-384	158	7	electro	electro	VERB
fuelectenerg-384	158	8	mechanical	mechanical	ADJ
fuelectenerg-384	158	9	systems	system	NOUN
fuelectenerg-384	158	10	,	,	PUNCT
fuelectenerg-384	158	11	mems	mems	PROPN
fuelectenerg-384	158	12	2008	2008	NUM
fuelectenerg-384	158	13	,	,	PUNCT
fuelectenerg-384	158	14	pp	pp	ADJ
fuelectenerg-384	158	15	.	.	PUNCT
fuelectenerg-384	159	1	172	172	NUM
fuelectenerg-384	159	2	-	-	SYM
fuelectenerg-384	159	3	175	175	NUM
fuelectenerg-384	159	4	jan	jan	PROPN
fuelectenerg-384	159	5	.	.	PROPN
fuelectenerg-384	159	6	2008	2008	NUM
fuelectenerg-384	160	1	[	[	X
fuelectenerg-384	160	2	4	4	X
fuelectenerg-384	160	3	]	]	PUNCT
fuelectenerg-384	160	4	m.	m.	NOUN
fuelectenerg-384	160	5	koutsoureli	koutsoureli	PROPN
fuelectenerg-384	160	6	,	,	PUNCT
fuelectenerg-384	160	7	l.	l.	PROPN
fuelectenerg-384	160	8	michalas	michalas	PROPN
fuelectenerg-384	160	9	,	,	PUNCT
fuelectenerg-384	160	10	p.	p.	PROPN
fuelectenerg-384	160	11	martins	martins	PROPN
fuelectenerg-384	160	12	,	,	PUNCT
fuelectenerg-384	160	13	e.	e.	PROPN
fuelectenerg-384	160	14	papandreou	papandreou	PROPN
fuelectenerg-384	160	15	,	,	PUNCT
fuelectenerg-384	160	16	a.	a.	NOUN
fuelectenerg-384	160	17	leuliet	leuliet	PROPN
fuelectenerg-384	160	18	,	,	PUNCT
fuelectenerg-384	160	19	s.	s.	PROPN
fuelectenerg-384	160	20	bansropun	bansropun	PROPN
fuelectenerg-384	160	21	,	,	PUNCT
fuelectenerg-384	160	22	g.	g.	PROPN
fuelectenerg-384	160	23	papaioannou	papaioannou	PROPN
fuelectenerg-384	160	24	,	,	PUNCT
fuelectenerg-384	160	25	a.	a.	NOUN
fuelectenerg-384	160	26	ziaei	ziaei	NOUN
fuelectenerg-384	160	27	“	"	PUNCT
fuelectenerg-384	160	28	properties	property	NOUN
fuelectenerg-384	160	29	of	of	ADP
fuelectenerg-384	160	30	contactless	contactless	NOUN
fuelectenerg-384	160	31	and	and	CCONJ
fuelectenerg-384	160	32	contacted	contact	VERB
fuelectenerg-384	160	33	charging	charging	NOUN
fuelectenerg-384	160	34	in	in	ADP
fuelectenerg-384	160	35	mems	mems	PROPN
fuelectenerg-384	160	36	capacitive	capacitive	ADJ
fuelectenerg-384	160	37	switches	switch	NOUN
fuelectenerg-384	160	38	”	"	PUNCT
fuelectenerg-384	160	39	microel	microel	PROPN
fuelectenerg-384	160	40	.	.	PUNCT
fuelectenerg-384	161	1	reliab	reliab	PROPN
fuelectenerg-384	161	2	.	.	PUNCT
fuelectenerg-384	162	1	,	,	PUNCT
fuelectenerg-384	162	2	vol	vol	NOUN
fuelectenerg-384	162	3	.	.	PROPN
fuelectenerg-384	163	1	53	53	NUM
fuelectenerg-384	163	2	,	,	PUNCT
fuelectenerg-384	163	3	pp	pp	ADJ
fuelectenerg-384	163	4	.	.	PUNCT
fuelectenerg-384	164	1	1655	1655	NUM
fuelectenerg-384	164	2	-	-	SYM
fuelectenerg-384	164	3	1658	1658	NUM
fuelectenerg-384	164	4	,	,	PUNCT
fuelectenerg-384	164	5	sep	sep	PROPN
fuelectenerg-384	164	6	.	.	PUNCT
fuelectenerg-384	165	1	2013	2013	NUM
fuelectenerg-384	166	1	[	[	X
fuelectenerg-384	166	2	5	5	NUM
fuelectenerg-384	166	3	]	]	PUNCT
fuelectenerg-384	166	4	l.	l.	PROPN
fuelectenerg-384	166	5	michalas	michalas	PROPN
fuelectenerg-384	166	6	,	,	PUNCT
fuelectenerg-384	166	7	a.	a.	NOUN
fuelectenerg-384	166	8	garg	garg	PROPN
fuelectenerg-384	166	9	,	,	PUNCT
fuelectenerg-384	166	10	a.	a.	PROPN
fuelectenerg-384	166	11	venkattraman	venkattraman	PROPN
fuelectenerg-384	166	12	m.	m.	PROPN
fuelectenerg-384	166	13	koutsoureli	koutsoureli	PROPN
fuelectenerg-384	166	14	,	,	PUNCT
fuelectenerg-384	166	15	a.	a.	NOUN
fuelectenerg-384	166	16	alexeenko	alexeenko	PROPN
fuelectenerg-384	166	17	,	,	PUNCT
fuelectenerg-384	166	18	d.	d.	PROPN
fuelectenerg-384	166	19	peroulis	peroulis	PROPN
fuelectenerg-384	166	20	and	and	CCONJ
fuelectenerg-384	166	21	g.	g.	PROPN
fuelectenerg-384	166	22	papaioannou	papaioannou	PROPN
fuelectenerg-384	166	23	“	"	PUNCT
fuelectenerg-384	166	24	a	a	DET
fuelectenerg-384	166	25	study	study	NOUN
fuelectenerg-384	166	26	of	of	ADP
fuelectenerg-384	166	27	field	field	NOUN
fuelectenerg-384	166	28	emission	emission	NOUN
fuelectenerg-384	166	29	process	process	NOUN
fuelectenerg-384	166	30	in	in	ADP
fuelectenerg-384	166	31	electrostatically	electrostatically	ADV
fuelectenerg-384	166	32	actuated	actuate	VERB
fuelectenerg-384	166	33	mems	mem	NOUN
fuelectenerg-384	166	34	switches	switch	NOUN
fuelectenerg-384	166	35	”	"	PUNCT
fuelectenerg-384	166	36	microel	microel	PROPN
fuelectenerg-384	166	37	.	.	PUNCT
fuelectenerg-384	167	1	reliab	reliab	PROPN
fuelectenerg-384	167	2	.	.	PUNCT
fuelectenerg-384	168	1	,	,	PUNCT
fuelectenerg-384	168	2	vol	vol	NOUN
fuelectenerg-384	168	3	.	.	PROPN
fuelectenerg-384	168	4	52	52	NUM
fuelectenerg-384	168	5	,	,	PUNCT
fuelectenerg-384	168	6	pp.2267	pp.2267	PROPN
fuelectenerg-384	168	7	-	-	PUNCT
fuelectenerg-384	168	8	2271	2271	NUM
fuelectenerg-384	168	9	,	,	PUNCT
fuelectenerg-384	168	10	sept	sept	PROPN
fuelectenerg-384	168	11	.	.	PROPN
fuelectenerg-384	168	12	2012	2012	NUM
fuelectenerg-384	168	13	.	.	PUNCT
fuelectenerg-384	169	1	[	[	X
fuelectenerg-384	169	2	6	6	NUM
fuelectenerg-384	169	3	]	]	PUNCT
fuelectenerg-384	169	4	l.	l.	PROPN
fuelectenerg-384	169	5	michalas	michalas	PROPN
fuelectenerg-384	169	6	,	,	PUNCT
fuelectenerg-384	169	7	m.	m.	NOUN
fuelectenerg-384	169	8	koutsoureli	koutsoureli	PROPN
fuelectenerg-384	169	9	,	,	PUNCT
fuelectenerg-384	169	10	g.	g.	PROPN
fuelectenerg-384	169	11	papaioannou	papaioannou	PROPN
fuelectenerg-384	169	12	“	"	PUNCT
fuelectenerg-384	169	13	probing	probe	VERB
fuelectenerg-384	169	14	contactless	contactless	ADJ
fuelectenerg-384	169	15	injection	injection	NOUN
fuelectenerg-384	169	16	dielectric	dielectric	NOUN
fuelectenerg-384	169	17	charging	charging	NOUN
fuelectenerg-384	169	18	in	in	ADP
fuelectenerg-384	169	19	rf	rf	NOUN
fuelectenerg-384	169	20	mems	mem	NOUN
fuelectenerg-384	169	21	capacitive	capacitive	ADJ
fuelectenerg-384	169	22	switches	switch	NOUN
fuelectenerg-384	169	23	”	"	PUNCT
fuelectenerg-384	169	24	iet	iet	PROPN
fuelectenerg-384	169	25	electron	electron	PROPN
fuelectenerg-384	169	26	.	.	PUNCT
fuelectenerg-384	170	1	lett	lett	PROPN
fuelectenerg-384	170	2	.	.	PROPN
fuelectenerg-384	170	3	,	,	PUNCT
fuelectenerg-384	170	4	vol	vol	NOUN
fuelectenerg-384	170	5	.	.	PROPN
fuelectenerg-384	171	1	50	50	NUM
fuelectenerg-384	171	2	,	,	PUNCT
fuelectenerg-384	171	3	no	no	DET
fuelectenerg-384	171	4	10	10	NUM
fuelectenerg-384	171	5	,	,	PUNCT
fuelectenerg-384	171	6	pp	pp	ADJ
fuelectenerg-384	171	7	.	.	PUNCT
fuelectenerg-384	172	1	766	766	NUM
fuelectenerg-384	172	2	-	-	SYM
fuelectenerg-384	172	3	768	768	NUM
fuelectenerg-384	172	4	,	,	PUNCT
fuelectenerg-384	172	5	may	may	AUX
fuelectenerg-384	172	6	2014	2014	NUM
fuelectenerg-384	172	7	.	.	PUNCT
fuelectenerg-384	173	1	[	[	X
fuelectenerg-384	173	2	7	7	X
fuelectenerg-384	173	3	]	]	X
fuelectenerg-384	173	4	m.	m.	NOUN
fuelectenerg-384	173	5	koutsoureli	koutsoureli	PROPN
fuelectenerg-384	173	6	,	,	PUNCT
fuelectenerg-384	173	7	l.	l.	PROPN
fuelectenerg-384	173	8	michalas	michalas	PROPN
fuelectenerg-384	173	9	and	and	CCONJ
fuelectenerg-384	173	10	g.	g.	PROPN
fuelectenerg-384	173	11	papaioannou	papaioannou	PROPN
fuelectenerg-384	173	12	“	"	PUNCT
fuelectenerg-384	173	13	charge	charge	NOUN
fuelectenerg-384	173	14	collection	collection	NOUN
fuelectenerg-384	173	15	mechanism	mechanism	NOUN
fuelectenerg-384	173	16	in	in	ADP
fuelectenerg-384	173	17	mems	mems	PROPN
fuelectenerg-384	173	18	capacitive	capacitive	ADJ
fuelectenerg-384	173	19	switches	switch	NOUN
fuelectenerg-384	173	20	”	"	PUNCT
fuelectenerg-384	173	21	in	in	ADP
fuelectenerg-384	173	22	proc	proc	NOUN
fuelectenerg-384	173	23	.	.	PUNCT
fuelectenerg-384	174	1	ieee	ieee	PROPN
fuelectenerg-384	174	2	int	int	PROPN
fuelectenerg-384	174	3	.	.	PUNCT
fuelectenerg-384	175	1	reliab	reliab	PROPN
fuelectenerg-384	175	2	.	.	PUNCT
fuelectenerg-384	176	1	phys	phy	NOUN
fuelectenerg-384	176	2	.	.	PUNCT
fuelectenerg-384	177	1	symp	symp	PROPN
fuelectenerg-384	177	2	.	.	PUNCT
fuelectenerg-384	178	1	,	,	PUNCT
fuelectenerg-384	178	2	pp	pp	ADV
fuelectenerg-384	178	3	.	.	PUNCT
fuelectenerg-384	179	1	me2.1me	me2.1me	PROPN
fuelectenerg-384	179	2	2.5	2.5	NUM
fuelectenerg-384	179	3	,	,	PUNCT
fuelectenerg-384	179	4	april	april	PROPN
fuelectenerg-384	179	5	2012	2012	NUM
fuelectenerg-384	179	6	[	[	X
fuelectenerg-384	179	7	8	8	NUM
fuelectenerg-384	179	8	]	]	PUNCT
fuelectenerg-384	179	9	x.	x.	NOUN
fuelectenerg-384	179	10	rottenberg	rottenberg	PROPN
fuelectenerg-384	179	11	,	,	PUNCT
fuelectenerg-384	179	12	i.	i.	PROPN
fuelectenerg-384	179	13	de	de	PROPN
fuelectenerg-384	179	14	wolf	wolf	PROPN
fuelectenerg-384	179	15	,	,	PUNCT
fuelectenerg-384	179	16	b.k.j.c	b.k.j.c	PROPN
fuelectenerg-384	179	17	.	.	PROPN
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fuelectenerg-384	179	19	,	,	PUNCT
fuelectenerg-384	179	20	w.	w.	PROPN
fuelectenerg-384	179	21	de	de	PROPN
fuelectenerg-384	179	22	raedt	raedt	PROPN
fuelectenerg-384	179	23	,	,	PUNCT
fuelectenerg-384	179	24	h.a.c	h.a.c	NOUN
fuelectenerg-384	179	25	.	.	PUNCT
fuelectenerg-384	180	1	tilmans	tilman	NOUN
fuelectenerg-384	180	2	“	"	PUNCT
fuelectenerg-384	180	3	analytical	analytical	ADJ
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fuelectenerg-384	208	11	h.	h.	PROPN
fuelectenerg-384	208	12	wang	wang	PROPN
fuelectenerg-384	208	13	,	,	PUNCT
fuelectenerg-384	208	14	b.	b.	PROPN
fuelectenerg-384	208	15	bhushan	bhushan	PROPN
fuelectenerg-384	208	16	,	,	PUNCT
fuelectenerg-384	208	17	f.	f.	PROPN
fuelectenerg-384	208	18	cocceti	cocceti	PROPN
fuelectenerg-384	208	19	,	,	PUNCT
fuelectenerg-384	208	20	p.	p.	NOUN
fuelectenerg-384	208	21	pons	pon	NOUN
fuelectenerg-384	208	22	,	,	PUNCT
fuelectenerg-384	208	23	r.	r.	PROPN
fuelectenerg-384	208	24	plana	plana	PROPN
fuelectenerg-384	208	25	“	"	PUNCT
fuelectenerg-384	208	26	nanoscale	nanoscale	NOUN
fuelectenerg-384	208	27	characterization	characterization	NOUN
fuelectenerg-384	208	28	of	of	ADP
fuelectenerg-384	208	29	the	the	DET
fuelectenerg-384	208	30	dielectric	dielectric	ADJ
fuelectenerg-384	208	31	charging	charge	VERB
fuelectenerg-384	208	32	phenomenon	phenomenon	NOUN
fuelectenerg-384	208	33	in	in	ADP
fuelectenerg-384	208	34	pecvd	pecvd	PROPN
fuelectenerg-384	208	35	silicon	silicon	NOUN
fuelectenerg-384	208	36	nitride	nitride	ADJ
fuelectenerg-384	208	37	thin	thin	ADJ
fuelectenerg-384	208	38	films	film	NOUN
fuelectenerg-384	208	39	with	with	ADP
fuelectenerg-384	208	40	varius	varius	PROPN
fuelectenerg-384	208	41	interfacial	interfacial	ADJ
fuelectenerg-384	208	42	structures	structure	NOUN
fuelectenerg-384	208	43	based	base	VERB
fuelectenerg-384	208	44	on	on	ADP
fuelectenerg-384	208	45	kelvin	kelvin	PROPN
fuelectenerg-384	208	46	probe	probe	PROPN
fuelectenerg-384	208	47	force	force	PROPN
fuelectenerg-384	208	48	microscopy	microscopy	PROPN
fuelectenerg-384	208	49	”	"	PUNCT
fuelectenerg-384	208	50	nanotechnology	nanotechnology	NOUN
fuelectenerg-384	208	51	,	,	PUNCT
fuelectenerg-384	208	52	vol	vol	NOUN
fuelectenerg-384	208	53	.	.	PUNCT
fuelectenerg-384	209	1	22	22	NUM
fuelectenerg-384	209	2	,	,	PUNCT
fuelectenerg-384	209	3	pp	pp	ADJ
fuelectenerg-384	209	4	.	.	PUNCT
fuelectenerg-384	210	1	205708	205708	NUM
fuelectenerg-384	210	2	,	,	PUNCT
fuelectenerg-384	210	3	2011	2011	NUM
fuelectenerg-384	210	4	[	[	X
fuelectenerg-384	210	5	15	15	NUM
fuelectenerg-384	210	6	]	]	X
fuelectenerg-384	210	7	e.	e.	PROPN
fuelectenerg-384	210	8	papandreou	papandreou	PROPN
fuelectenerg-384	210	9	,	,	PUNCT
fuelectenerg-384	210	10	m.	m.	NOUN
fuelectenerg-384	210	11	lamhamdi	lamhamdi	PROPN
fuelectenerg-384	210	12	,	,	PUNCT
fuelectenerg-384	210	13	c.m	c.m	PROPN
fuelectenerg-384	210	14	.	.	PROPN
fuelectenerg-384	210	15	skoulikidou	skoulikidou	PROPN
fuelectenerg-384	210	16	,	,	PUNCT
fuelectenerg-384	210	17	p.	p.	NOUN
fuelectenerg-384	210	18	pons	pons	PROPN
fuelectenerg-384	210	19	,	,	PUNCT
fuelectenerg-384	210	20	g.	g.	PROPN
fuelectenerg-384	210	21	papaioannou	papaioannou	PROPN
fuelectenerg-384	210	22	,	,	PUNCT
fuelectenerg-384	210	23	r.	r.	PROPN
fuelectenerg-384	210	24	plana	plana	PROPN
fuelectenerg-384	210	25	“	"	PUNCT
fuelectenerg-384	210	26	structure	structure	NOUN
fuelectenerg-384	210	27	dependent	dependent	ADJ
fuelectenerg-384	210	28	charging	charging	NOUN
fuelectenerg-384	210	29	process	process	NOUN
fuelectenerg-384	210	30	in	in	ADP
fuelectenerg-384	210	31	rf	rf	NOUN
fuelectenerg-384	210	32	mems	mem	NOUN
fuelectenerg-384	210	33	capacitive	capacitive	ADJ
fuelectenerg-384	210	34	switches	switch	NOUN
fuelectenerg-384	210	35	”	"	PUNCT
fuelectenerg-384	210	36	microel	microel	PROPN
fuelectenerg-384	210	37	.	.	PUNCT
fuelectenerg-384	211	1	reliab	reliab	PROPN
fuelectenerg-384	211	2	.	.	PUNCT
fuelectenerg-384	212	1	,	,	PUNCT
fuelectenerg-384	212	2	vol	vol	NOUN
fuelectenerg-384	212	3	.	.	PUNCT
fuelectenerg-384	213	1	47	47	NUM
fuelectenerg-384	213	2	pp	pp	ADJ
fuelectenerg-384	213	3	.	.	PUNCT
fuelectenerg-384	214	1	1812	1812	NUM
fuelectenerg-384	214	2	-	-	SYM
fuelectenerg-384	214	3	1817	1817	NUM
fuelectenerg-384	214	4	,	,	PUNCT
fuelectenerg-384	214	5	sept	sept	PROPN
fuelectenerg-384	214	6	.	.	PROPN
fuelectenerg-384	214	7	2007	2007	NUM
fuelectenerg-384	215	1	[	[	X
fuelectenerg-384	215	2	16	16	NUM
fuelectenerg-384	215	3	]	]	X
fuelectenerg-384	215	4	r.	r.	PROPN
fuelectenerg-384	215	5	daigler	daigler	PROPN
fuelectenerg-384	215	6	,	,	PUNCT
fuelectenerg-384	215	7	e.	e.	PROPN
fuelectenerg-384	215	8	papandreou	papandreou	PROPN
fuelectenerg-384	215	9	,	,	PUNCT
fuelectenerg-384	215	10	m.	m.	PROPN
fuelectenerg-384	215	11	koutsoureli	koutsoureli	PROPN
fuelectenerg-384	215	12	,	,	PUNCT
fuelectenerg-384	215	13	g.	g.	PROPN
fuelectenerg-384	215	14	papaioannou	papaioannou	PROPN
fuelectenerg-384	215	15	,	,	PUNCT
fuelectenerg-384	215	16	j.	j.	PROPN
fuelectenerg-384	215	17	papapolymerou	papapolymerou	PROPN
fuelectenerg-384	215	18	“	"	PUNCT
fuelectenerg-384	215	19	effect	effect	NOUN
fuelectenerg-384	215	20	of	of	ADP
fuelectenerg-384	215	21	deposition	deposition	NOUN
fuelectenerg-384	215	22	conditions	condition	NOUN
fuelectenerg-384	215	23	on	on	ADP
fuelectenerg-384	215	24	charging	charge	VERB
fuelectenerg-384	215	25	processes	process	NOUN
fuelectenerg-384	215	26	in	in	ADP
fuelectenerg-384	215	27	sinx	sinx	NOUN
fuelectenerg-384	215	28	:	:	PUNCT
fuelectenerg-384	215	29	application	application	NOUN
fuelectenerg-384	215	30	to	to	ADP
fuelectenerg-384	215	31	rf	rf	NOUN
fuelectenerg-384	215	32	mems	mem	NOUN
fuelectenerg-384	215	33	capacitive	capacitive	ADJ
fuelectenerg-384	215	34	switches	switch	NOUN
fuelectenerg-384	215	35	,	,	PUNCT
fuelectenerg-384	215	36	microel	microel	ADV
fuelectenerg-384	215	37	.	.	PUNCT
fuelectenerg-384	216	1	engineer	engineer	NOUN
fuelectenerg-384	216	2	.	.	PUNCT
fuelectenerg-384	217	1	,	,	PUNCT
fuelectenerg-384	217	2	vol	vol	NOUN
fuelectenerg-384	217	3	.	.	PUNCT
fuelectenerg-384	218	1	86	86	NUM
fuelectenerg-384	218	2	pp	pp	ADJ
fuelectenerg-384	218	3	.	.	PUNCT
fuelectenerg-384	219	1	404	404	NUM
fuelectenerg-384	219	2	-	-	SYM
fuelectenerg-384	219	3	407	407	NUM
fuelectenerg-384	219	4	,	,	PUNCT
fuelectenerg-384	219	5	mar	mar	PROPN
fuelectenerg-384	219	6	.	.	PROPN
fuelectenerg-384	219	7	2009	2009	NUM
fuelectenerg-384	219	8	[	[	X
fuelectenerg-384	219	9	17	17	NUM
fuelectenerg-384	219	10	]	]	X
fuelectenerg-384	219	11	u.	u.	PROPN
fuelectenerg-384	219	12	zaghloul	zaghloul	PROPN
fuelectenerg-384	219	13	,	,	PUNCT
fuelectenerg-384	219	14	g.	g.	PROPN
fuelectenerg-384	219	15	papaioannou	papaioannou	PROPN
fuelectenerg-384	219	16	,	,	PUNCT
fuelectenerg-384	219	17	f.	f.	PROPN
fuelectenerg-384	219	18	coccetti	coccetti	PROPN
fuelectenerg-384	219	19	,	,	PUNCT
fuelectenerg-384	219	20	p.	p.	NOUN
fuelectenerg-384	219	21	pons	pon	NOUN
fuelectenerg-384	219	22	,	,	PUNCT
fuelectenerg-384	219	23	r.	r.	PROPN
fuelectenerg-384	219	24	plana	plana	PROPN
fuelectenerg-384	220	1	“	"	PUNCT
fuelectenerg-384	220	2	dielectric	dielectric	ADJ
fuelectenerg-384	220	3	charging	charging	NOUN
fuelectenerg-384	220	4	in	in	ADP
fuelectenerg-384	220	5	silicon	silicon	NOUN
fuelectenerg-384	220	6	nitride	nitride	ADJ
fuelectenerg-384	220	7	films	film	NOUN
fuelectenerg-384	220	8	for	for	ADP
fuelectenerg-384	220	9	mems	mem	NOUN
fuelectenerg-384	220	10	capacitive	capacitive	ADJ
fuelectenerg-384	220	11	switches	switch	NOUN
fuelectenerg-384	220	12	:	:	PUNCT
fuelectenerg-384	220	13	effect	effect	NOUN
fuelectenerg-384	220	14	of	of	ADP
fuelectenerg-384	220	15	film	film	NOUN
fuelectenerg-384	220	16	thickness	thickness	NOUN
fuelectenerg-384	220	17	and	and	CCONJ
fuelectenerg-384	220	18	deposition	deposition	NOUN
fuelectenerg-384	220	19	conditions	condition	NOUN
fuelectenerg-384	220	20	,	,	PUNCT
fuelectenerg-384	220	21	microel	microel	ADV
fuelectenerg-384	220	22	.	.	PUNCT
fuelectenerg-384	221	1	reliab	reliab	PROPN
fuelectenerg-384	221	2	.	.	PUNCT
fuelectenerg-384	222	1	,	,	PUNCT
fuelectenerg-384	222	2	vol	vol	NOUN
fuelectenerg-384	222	3	.	.	PROPN
fuelectenerg-384	223	1	49	49	NUM
fuelectenerg-384	223	2	pp	pp	ADJ
fuelectenerg-384	223	3	.	.	PUNCT
fuelectenerg-384	224	1	1309	1309	NUM
fuelectenerg-384	224	2	-	-	SYM
fuelectenerg-384	224	3	1314	1314	NUM
fuelectenerg-384	224	4	,	,	PUNCT
fuelectenerg-384	224	5	sept	sept	PROPN
fuelectenerg-384	224	6	.	.	PROPN
fuelectenerg-384	224	7	2009	2009	NUM
fuelectenerg-384	225	1	[	[	X
fuelectenerg-384	225	2	18	18	NUM
fuelectenerg-384	225	3	]	]	PUNCT
fuelectenerg-384	225	4	m.	m.	NOUN
fuelectenerg-384	225	5	koutsoureli	koutsoureli	PROPN
fuelectenerg-384	225	6	,	,	PUNCT
fuelectenerg-384	225	7	l.	l.	PROPN
fuelectenerg-384	225	8	michalas	michalas	PROPN
fuelectenerg-384	225	9	,	,	PUNCT
fuelectenerg-384	225	10	a.	a.	PROPN
fuelectenerg-384	225	11	gantis	gantis	PROPN
fuelectenerg-384	225	12	,	,	PUNCT
fuelectenerg-384	225	13	g.	g.	PROPN
fuelectenerg-384	225	14	papaioannou	papaioannou	PROPN
fuelectenerg-384	225	15	“	"	PUNCT
fuelectenerg-384	225	16	a	a	DET
fuelectenerg-384	225	17	study	study	NOUN
fuelectenerg-384	225	18	of	of	ADP
fuelectenerg-384	225	19	deposition	deposition	NOUN
fuelectenerg-384	225	20	conditions	condition	NOUN
fuelectenerg-384	225	21	on	on	ADP
fuelectenerg-384	225	22	charging	charge	VERB
fuelectenerg-384	225	23	properties	property	NOUN
fuelectenerg-384	225	24	of	of	ADP
fuelectenerg-384	225	25	pecvd	pecvd	NOUN
fuelectenerg-384	225	26	silicon	silicon	NOUN
fuelectenerg-384	225	27	nitride	nitride	NOUN
fuelectenerg-384	225	28	films	film	NOUN
fuelectenerg-384	225	29	for	for	ADP
fuelectenerg-384	225	30	mems	mem	NOUN
fuelectenerg-384	225	31	capacitive	capacitive	ADJ
fuelectenerg-384	225	32	switches”microel	switches”microel	PROPN
fuelectenerg-384	225	33	.	.	PUNCT
fuelectenerg-384	225	34	reliab	reliab	PROPN
fuelectenerg-384	225	35	.	.	PUNCT
fuelectenerg-384	225	36	,	,	PUNCT
fuelectenerg-384	225	37	vol	vol	NOUN
fuelectenerg-384	225	38	.	.	PUNCT
fuelectenerg-384	226	1	54	54	NUM
fuelectenerg-384	226	2	pp	pp	NUM
fuelectenerg-384	226	3	.	.	PUNCT
fuelectenerg-384	227	1	2159	2159	NUM
fuelectenerg-384	227	2	–	–	PUNCT
fuelectenerg-384	227	3	2163	2163	NUM
fuelectenerg-384	227	4	,	,	PUNCT
fuelectenerg-384	227	5	sept	sept	PROPN
fuelectenerg-384	227	6	.	.	PROPN
fuelectenerg-384	227	7	2014	2014	NUM
fuelectenerg-384	228	1	[	[	X
fuelectenerg-384	228	2	19	19	NUM
fuelectenerg-384	228	3	]	]	X
fuelectenerg-384	228	4	l.	l.	PROPN
fuelectenerg-384	228	5	michalas	michalas	PROPN
fuelectenerg-384	228	6	,	,	PUNCT
fuelectenerg-384	228	7	m.	m.	PROPN
fuelectenerg-384	228	8	koutsoureli	koutsoureli	PROPN
fuelectenerg-384	228	9	,	,	PUNCT
fuelectenerg-384	228	10	e.	e.	PROPN
fuelectenerg-384	228	11	papandreou	papandreou	PROPN
fuelectenerg-384	228	12	,	,	PUNCT
fuelectenerg-384	228	13	a.	a.	PROPN
fuelectenerg-384	228	14	gantis	gantis	PROPN
fuelectenerg-384	228	15	,	,	PUNCT
fuelectenerg-384	228	16	g.	g.	PROPN
fuelectenerg-384	228	17	papaioannou	papaioannou	PROPN
fuelectenerg-384	228	18	“	"	PUNCT
fuelectenerg-384	228	19	assessment	assessment	NOUN
fuelectenerg-384	228	20	of	of	ADP
fuelectenerg-384	228	21	dielectric	dielectric	ADJ
fuelectenerg-384	228	22	charging	charging	NOUN
fuelectenerg-384	228	23	in	in	ADP
fuelectenerg-384	228	24	rf	rf	NOUN
fuelectenerg-384	228	25	mems	mem	NOUN
fuelectenerg-384	228	26	capacitive	capacitive	ADJ
fuelectenerg-384	228	27	switches	switch	NOUN
fuelectenerg-384	228	28	with	with	ADP
fuelectenerg-384	228	29	the	the	DET
fuelectenerg-384	228	30	aid	aid	NOUN
fuelectenerg-384	228	31	of	of	ADP
fuelectenerg-384	228	32	mim	mim	PROPN
fuelectenerg-384	228	33	capacitors”in	capacitors”in	PROPN
fuelectenerg-384	228	34	proc	proc	NOUN
fuelectenerg-384	228	35	.	.	PUNCT
fuelectenerg-384	229	1	of	of	ADP
fuelectenerg-384	229	2	29th	29th	ADJ
fuelectenerg-384	229	3	international	international	ADJ
fuelectenerg-384	229	4	conference	conference	NOUN
fuelectenerg-384	229	5	on	on	ADP
fuelectenerg-384	229	6	microelectronics	microelectronic	NOUN
fuelectenerg-384	229	7	(	(	PUNCT
fuelectenerg-384	229	8	miel	miel	PROPN
fuelectenerg-384	229	9	2014	2014	NUM
fuelectenerg-384	229	10	)	)	PUNCT
fuelectenerg-384	229	11	,	,	PUNCT
fuelectenerg-384	229	12	pp	pp	PROPN
fuelectenerg-384	229	13	.	.	PUNCT
fuelectenerg-384	230	1	125	125	NUM
fuelectenerg-384	230	2	-	-	SYM
fuelectenerg-384	230	3	128	128	NUM
fuelectenerg-384	230	4	,	,	PUNCT
fuelectenerg-384	230	5	may	may	AUX
fuelectenerg-384	230	6	2014	2014	NUM
fuelectenerg-384	230	7	[	[	X
fuelectenerg-384	230	8	20	20	NUM
fuelectenerg-384	230	9	]	]	PUNCT
fuelectenerg-384	230	10	m.	m.	NOUN
fuelectenerg-384	230	11	koutsoureli	koutsoureli	PROPN
fuelectenerg-384	230	12	,	,	PUNCT
fuelectenerg-384	230	13	g.	g.	PROPN
fuelectenerg-384	230	14	papaioannou	papaioannou	PROPN
fuelectenerg-384	230	15	“	"	PUNCT
fuelectenerg-384	230	16	determination	determination	NOUN
fuelectenerg-384	230	17	of	of	ADP
fuelectenerg-384	230	18	bulk	bulk	ADJ
fuelectenerg-384	230	19	discharge	discharge	NOUN
fuelectenerg-384	230	20	currents	current	NOUN
fuelectenerg-384	230	21	in	in	ADP
fuelectenerg-384	230	22	the	the	DET
fuelectenerg-384	230	23	dielectric	dielectric	ADJ
fuelectenerg-384	230	24	film	film	NOUN
fuelectenerg-384	230	25	of	of	ADP
fuelectenerg-384	230	26	mems	mem	NOUN
fuelectenerg-384	230	27	capacitive	capacitive	ADJ
fuelectenerg-384	230	28	switches	switch	NOUN
fuelectenerg-384	230	29	”	"	PUNCT
fuelectenerg-384	230	30	microel	microel	PROPN
fuelectenerg-384	230	31	.	.	PUNCT
fuelectenerg-384	230	32	reliab	reliab	PROPN
fuelectenerg-384	230	33	.	.	PUNCT
fuelectenerg-384	231	1	,	,	PUNCT
fuelectenerg-384	231	2	vol	vol	NOUN
fuelectenerg-384	231	3	.	.	PUNCT
fuelectenerg-384	232	1	51	51	NUM
fuelectenerg-384	232	2	pp	pp	ADJ
fuelectenerg-384	232	3	.	.	PUNCT
fuelectenerg-384	233	1	1874	1874	NUM
fuelectenerg-384	233	2	-	-	SYM
fuelectenerg-384	233	3	1877	1877	NUM
fuelectenerg-384	233	4	,	,	PUNCT
fuelectenerg-384	233	5	sept	sept	PROPN
fuelectenerg-384	233	6	.	.	PROPN
fuelectenerg-384	233	7	2011	2011	NUM
fuelectenerg-384	233	8	.	.	PUNCT
fuelectenerg-384	234	1	[	[	X
fuelectenerg-384	234	2	21	21	NUM
fuelectenerg-384	234	3	]	]	X
fuelectenerg-384	234	4	r.	r.	PROPN
fuelectenerg-384	234	5	ramprasad	ramprasad	ADJ
fuelectenerg-384	234	6	“	"	PUNCT
fuelectenerg-384	234	7	phenomenological	phenomenological	ADJ
fuelectenerg-384	234	8	theory	theory	NOUN
fuelectenerg-384	234	9	to	to	PART
fuelectenerg-384	234	10	model	model	VERB
fuelectenerg-384	234	11	leakage	leakage	NOUN
fuelectenerg-384	234	12	currents	current	NOUN
fuelectenerg-384	234	13	in	in	ADP
fuelectenerg-384	234	14	metal	metal	NOUN
fuelectenerg-384	234	15	-	-	PUNCT
fuelectenerg-384	234	16	insulator	insulator	NOUN
fuelectenerg-384	234	17	-	-	PUNCT
fuelectenerg-384	234	18	metal	metal	NOUN
fuelectenerg-384	234	19	capacitor	capacitor	NOUN
fuelectenerg-384	234	20	systems	system	NOUN
fuelectenerg-384	234	21	”	"	PUNCT
fuelectenerg-384	234	22	phys	phy	NOUN
fuelectenerg-384	234	23	.	.	PUNCT
fuelectenerg-384	235	1	stat	stat	PROPN
fuelectenerg-384	235	2	.	.	PUNCT
fuelectenerg-384	236	1	sol.(b	sol.(b	PROPN
fuelectenerg-384	236	2	)	)	PUNCT
fuelectenerg-384	236	3	,	,	PUNCT
fuelectenerg-384	236	4	vol	vol	NOUN
fuelectenerg-384	236	5	.	.	PROPN
fuelectenerg-384	237	1	239	239	NUM
fuelectenerg-384	237	2	,	,	PUNCT
fuelectenerg-384	237	3	no	no	DET
fuelectenerg-384	237	4	1	1	NUM
fuelectenerg-384	237	5	,	,	PUNCT
fuelectenerg-384	237	6	pp	pp	ADJ
fuelectenerg-384	237	7	.	.	PUNCT
fuelectenerg-384	238	1	59	59	NUM
fuelectenerg-384	238	2	-	-	SYM
fuelectenerg-384	238	3	70	70	NUM
fuelectenerg-384	238	4	,	,	PUNCT
fuelectenerg-384	238	5	2003	2003	NUM
fuelectenerg-384	239	1	[	[	X
fuelectenerg-384	239	2	22	22	NUM
fuelectenerg-384	239	3	]	]	X
fuelectenerg-384	239	4	g.	g.	PROPN
fuelectenerg-384	239	5	papaioannou	papaioannou	PROPN
fuelectenerg-384	239	6	,	,	PUNCT
fuelectenerg-384	239	7	f.	f.	PROPN
fuelectenerg-384	239	8	coccetti	coccetti	PROPN
fuelectenerg-384	239	9	,	,	PUNCT
fuelectenerg-384	239	10	r.	r.	PROPN
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fuelectenerg-384	240	1	“	"	PUNCT
fuelectenerg-384	240	2	on	on	ADP
fuelectenerg-384	240	3	the	the	DET
fuelectenerg-384	240	4	modeling	modeling	NOUN
fuelectenerg-384	240	5	of	of	ADP
fuelectenerg-384	240	6	dielectric	dielectric	ADJ
fuelectenerg-384	240	7	charging	charging	NOUN
fuelectenerg-384	240	8	in	in	ADP
fuelectenerg-384	240	9	rf	rf	ADJ
fuelectenerg-384	240	10	-	-	PUNCT
fuelectenerg-384	240	11	mems	mems	ADJ
fuelectenerg-384	240	12	capacitive	capacitive	ADJ
fuelectenerg-384	240	13	switches	switch	NOUN
fuelectenerg-384	240	14	”	"	PUNCT
fuelectenerg-384	240	15	in	in	ADP
fuelectenerg-384	240	16	proc	proc	NOUN
fuelectenerg-384	240	17	.	.	PUNCT
fuelectenerg-384	241	1	top	top	ADJ
fuelectenerg-384	241	2	.	.	PUNCT
fuelectenerg-384	242	1	meet	meet	VERB
fuelectenerg-384	242	2	.	.	PUNCT
fuelectenerg-384	243	1	on	on	ADP
fuelectenerg-384	243	2	silicon	silicon	PROPN
fuelectenerg-384	243	3	monolith	monolith	PROPN
fuelectenerg-384	243	4	.	.	PUNCT
fuelectenerg-384	244	1	int	int	NOUN
fuelectenerg-384	244	2	.	.	PUNCT
fuelectenerg-384	245	1	circ	circ	PROPN
fuelectenerg-384	245	2	.	.	PUNCT
fuelectenerg-384	246	1	in	in	ADP
fuelectenerg-384	246	2	rf	rf	NOUN
fuelectenerg-384	246	3	syst	syst	NOUN
fuelectenerg-384	246	4	.	.	PUNCT
fuelectenerg-384	246	5	,	,	PUNCT
fuelectenerg-384	246	6	pp	pp	PROPN
fuelectenerg-384	246	7	.	.	PUNCT
fuelectenerg-384	247	1	108	108	NUM
fuelectenerg-384	247	2	-	-	SYM
fuelectenerg-384	247	3	111	111	NUM
fuelectenerg-384	247	4	,	,	PUNCT
fuelectenerg-384	247	5	jan	jan	PROPN
fuelectenerg-384	247	6	.	.	PROPN
fuelectenerg-384	247	7	2010	2010	NUM
fuelectenerg-384	248	1	[	[	X
fuelectenerg-384	248	2	23	23	NUM
fuelectenerg-384	248	3	]	]	X
fuelectenerg-384	248	4	j.	j.	PROPN
fuelectenerg-384	248	5	wibbeler	wibbeler	PROPN
fuelectenerg-384	248	6	,	,	PUNCT
fuelectenerg-384	248	7	g.	g.	PROPN
fuelectenerg-384	248	8	pfeifera	pfeifera	NOUN
fuelectenerg-384	248	9	,	,	PUNCT
fuelectenerg-384	248	10	m.	m.	NOUN
fuelectenerg-384	248	11	hietschold	hietschold	PROPN
fuelectenerg-384	248	12	“	"	PUNCT
fuelectenerg-384	248	13	parasitic	parasitic	ADJ
fuelectenerg-384	248	14	charging	charging	NOUN
fuelectenerg-384	248	15	of	of	ADP
fuelectenerg-384	248	16	dielectric	dielectric	ADJ
fuelectenerg-384	248	17	surfaces	surface	NOUN
fuelectenerg-384	248	18	in	in	ADP
fuelectenerg-384	248	19	capacitive	capacitive	ADJ
fuelectenerg-384	248	20	microelectromechanical	microelectromechanical	ADJ
fuelectenerg-384	248	21	systems	system	NOUN
fuelectenerg-384	248	22	(	(	PUNCT
fuelectenerg-384	248	23	mems	mem	NOUN
fuelectenerg-384	248	24	)	)	PUNCT
fuelectenerg-384	248	25	”	"	PUNCT
fuelectenerg-384	248	26	sensors	sensor	NOUN
fuelectenerg-384	248	27	and	and	CCONJ
fuelectenerg-384	248	28	actuators	actuator	NOUN
fuelectenerg-384	249	1	a	a	DET
fuelectenerg-384	249	2	:	:	PUNCT
fuelectenerg-384	249	3	physical	physical	ADJ
fuelectenerg-384	249	4	,	,	PUNCT
fuelectenerg-384	249	5	vol	vol	NOUN
fuelectenerg-384	249	6	.	.	PROPN
fuelectenerg-384	249	7	71	71	NUM
fuelectenerg-384	249	8	,	,	PUNCT
fuelectenerg-384	249	9	pp.74	pp.74	NOUN
fuelectenerg-384	249	10	-	-	SYM
fuelectenerg-384	249	11	80	80	NUM
fuelectenerg-384	249	12	,	,	PUNCT
fuelectenerg-384	249	13	is	be	AUX
fuelectenerg-384	249	14	.	.	PUNCT
fuelectenerg-384	250	1	1	1	X
fuelectenerg-384	250	2	–	–	PUNCT
fuelectenerg-384	250	3	2	2	NUM
fuelectenerg-384	250	4	,	,	PUNCT
fuelectenerg-384	250	5	nov	nov	PROPN
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fuelectenerg-384	250	7	1998	1998	NUM
fuelectenerg-384	250	8	[	[	X
fuelectenerg-384	250	9	24	24	NUM
fuelectenerg-384	250	10	]	]	X
fuelectenerg-384	250	11	r.w	r.w	PROPN
fuelectenerg-384	250	12	.	.	PROPN
fuelectenerg-384	250	13	herfst	herfst	PROPN
fuelectenerg-384	250	14	,	,	PUNCT
fuelectenerg-384	250	15	p.g	p.g	PROPN
fuelectenerg-384	250	16	.	.	PROPN
fuelectenerg-384	250	17	steeneken	steeneken	PROPN
fuelectenerg-384	250	18	,	,	PUNCT
fuelectenerg-384	250	19	j.	j.	PROPN
fuelectenerg-384	250	20	schmitz	schmitz	PROPN
fuelectenerg-384	250	21	,	,	PUNCT
fuelectenerg-384	250	22	a.j.g	a.j.g	PROPN
fuelectenerg-384	250	23	.	.	PROPN
fuelectenerg-384	250	24	mank	mank	PROPN
fuelectenerg-384	250	25	,	,	PUNCT
fuelectenerg-384	250	26	m.	m.	NOUN
fuelectenerg-384	250	27	van	van	PROPN
fuelectenerg-384	250	28	gils	gil	VERB
fuelectenerg-384	250	29	“	"	PUNCT
fuelectenerg-384	250	30	kelvin	kelvin	PROPN
fuelectenerg-384	250	31	probe	probe	PROPN
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fuelectenerg-384	250	33	of	of	ADP
fuelectenerg-384	250	34	laterally	laterally	ADV
fuelectenerg-384	250	35	inhomogeneous	inhomogeneous	ADJ
fuelectenerg-384	250	36	dielectric	dielectric	ADJ
fuelectenerg-384	250	37	charging	charging	NOUN
fuelectenerg-384	250	38	and	and	CCONJ
fuelectenerg-384	250	39	charge	charge	NOUN
fuelectenerg-384	250	40	diffusion	diffusion	NOUN
fuelectenerg-384	250	41	in	in	ADP
fuelectenerg-384	250	42	rf	rf	NOUN
fuelectenerg-384	250	43	mems	mem	NOUN
fuelectenerg-384	250	44	capacitive	capacitive	ADJ
fuelectenerg-384	250	45	switches	switch	NOUN
fuelectenerg-384	250	46	”	"	PUNCT
fuelectenerg-384	250	47	.	.	PUNCT
fuelectenerg-384	251	1	proc	proc	NOUN
fuelectenerg-384	251	2	.	.	PUNCT
fuelectenerg-384	252	1	ieee	ieee	PROPN
fuelectenerg-384	252	2	int	int	PROPN
fuelectenerg-384	252	3	.	.	PUNCT
fuelectenerg-384	253	1	reliability	reliability	NOUN
fuelectenerg-384	253	2	physics	physics	NOUN
fuelectenerg-384	253	3	symposium	symposium	NOUN
fuelectenerg-384	253	4	(	(	PUNCT
fuelectenerg-384	253	5	irps	irps	PROPN
fuelectenerg-384	253	6	)	)	PUNCT
fuelectenerg-384	253	7	2008	2008	NUM
fuelectenerg-384	253	8	,	,	PUNCT
fuelectenerg-384	253	9	pp	pp	ADJ
fuelectenerg-384	253	10	.	.	PUNCT
fuelectenerg-384	254	1	492	492	NUM
fuelectenerg-384	254	2	-	-	SYM
fuelectenerg-384	254	3	495,2008	495,2008	NOUN
fuelectenerg-384	254	4	[	[	X
fuelectenerg-384	254	5	25	25	NUM
fuelectenerg-384	254	6	]	]	PUNCT
fuelectenerg-384	254	7	http://www.kelvinprobe.com/	http://www.kelvinprobe.com/	NOUN
fuelectenerg-384	255	1	[	[	X
fuelectenerg-384	255	2	26	26	NUM
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fuelectenerg-384	255	6	,	,	PUNCT
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fuelectenerg-384	255	9	,	,	PUNCT
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fuelectenerg-384	255	17	relaxation	relaxation	NOUN
fuelectenerg-384	255	18	for	for	ADP
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fuelectenerg-384	255	21	”	"	PUNCT
fuelectenerg-384	255	22	phys	phy	NOUN
fuelectenerg-384	255	23	,	,	PUNCT
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fuelectenerg-384	255	25	.	.	PROPN
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fuelectenerg-384	255	27	.	.	PROPN
fuelectenerg-384	255	28	,	,	PUNCT
fuelectenerg-384	256	1	vol	vol	NOUN
fuelectenerg-384	256	2	.	.	PROPN
fuelectenerg-384	256	3	91	91	NUM
fuelectenerg-384	256	4	,	,	PUNCT
fuelectenerg-384	256	5	no	no	DET
fuelectenerg-384	256	6	17	17	NUM
fuelectenerg-384	256	7	,	,	PUNCT
fuelectenerg-384	256	8	pp	pp	ADJ
fuelectenerg-384	256	9	.	.	PUNCT
fuelectenerg-384	256	10	176602	176602	NUM
fuelectenerg-384	256	11	,	,	PUNCT
fuelectenerg-384	256	12	2003	2003	NUM
fuelectenerg-384	256	13	[	[	X
fuelectenerg-384	256	14	27	27	NUM
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fuelectenerg-384	256	26	“	"	PUNCT
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fuelectenerg-384	256	31	ac	ac	ADJ
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fuelectenerg-384	256	33	in	in	ADP
fuelectenerg-384	256	34	disordered	disordered	ADJ
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fuelectenerg-384	256	36	”	"	PUNCT
fuelectenerg-384	256	37	phys	phy	NOUN
fuelectenerg-384	256	38	.	.	PUNCT
fuelectenerg-384	257	1	rev	rev	PROPN
fuelectenerg-384	257	2	.	.	PROPN
fuelectenerg-384	258	1	b	b	X
fuelectenerg-384	258	2	,	,	PUNCT
fuelectenerg-384	258	3	vol	vol	NOUN
fuelectenerg-384	258	4	.	.	PROPN
fuelectenerg-384	259	1	76	76	NUM
fuelectenerg-384	259	2	,	,	PUNCT
fuelectenerg-384	259	3	pp	pp	ADJ
fuelectenerg-384	259	4	.	.	PUNCT
fuelectenerg-384	260	1	104201	104201	NUM
fuelectenerg-384	260	2	,	,	PUNCT
fuelectenerg-384	260	3	2007	2007	NUM
fuelectenerg-384	261	1	[	[	X
fuelectenerg-384	261	2	28	28	NUM
fuelectenerg-384	261	3	]	]	X
fuelectenerg-384	261	4	g.	g.	PROPN
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fuelectenerg-384	261	8	n.	n.	PROPN
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fuelectenerg-384	261	13	,	,	PUNCT
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fuelectenerg-384	266	7	.	.	PUNCT
fuelectenerg-384	267	1	3467	3467	NUM
fuelectenerg-384	267	2	-	-	SYM
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fuelectenerg-384	268	1	http://www.sciencedirect.com/science/article/pii/s0924424798001551	http://www.sciencedirect.com/science/article/pii/s0924424798001551	NOUN
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