id	sid	tid	token	lemma	pos
fuelectenerg-402	1	1	temperature	temperature	NOUN
fuelectenerg-402	1	2	measurement	measurement	NOUN
fuelectenerg-402	1	3	performance	performance	NOUN
fuelectenerg-402	1	4	of	of	ADP
fuelectenerg-402	1	5	silicon	silicon	NOUN
fuelectenerg-402	1	6	piezoresistive	piezoresistive	ADJ
fuelectenerg-402	1	7	mems	mem	NOUN
fuelectenerg-402	1	8	pressure	pressure	NOUN
fuelectenerg-402	1	9	sensors	sensor	NOUN
fuelectenerg-402	1	10	for	for	ADP
fuelectenerg-402	1	11	industrial	industrial	ADJ
fuelectenerg-402	1	12	applications	application	NOUN
fuelectenerg-402	1	13	facta	facta	PROPN
fuelectenerg-402	1	14	universitatis	universitatis	PROPN
fuelectenerg-402	1	15	series	series	NOUN
fuelectenerg-402	1	16	:	:	PUNCT
fuelectenerg-402	1	17	electronics	electronic	NOUN
fuelectenerg-402	1	18	and	and	CCONJ
fuelectenerg-402	1	19	energetics	energetics	NOUN
fuelectenerg-402	1	20	vol	vol	NOUN
fuelectenerg-402	1	21	.	.	PUNCT
fuelectenerg-402	1	22	28	28	NUM
fuelectenerg-402	1	23	,	,	PUNCT
fuelectenerg-402	1	24	no	no	DET
fuelectenerg-402	1	25	1	1	NUM
fuelectenerg-402	1	26	,	,	PUNCT
fuelectenerg-402	1	27	march	march	PROPN
fuelectenerg-402	1	28	2015	2015	NUM
fuelectenerg-402	1	29	,	,	PUNCT
fuelectenerg-402	1	30	pp	pp	ADJ
fuelectenerg-402	1	31	.	.	PUNCT
fuelectenerg-402	2	1	123	123	NUM
fuelectenerg-402	2	2	131	131	NUM
fuelectenerg-402	2	3	doi	doi	NOUN
fuelectenerg-402	2	4	:	:	PUNCT
fuelectenerg-402	2	5	10.2298	10.2298	NUM
fuelectenerg-402	2	6	/	/	SYM
fuelectenerg-402	2	7	fuee1501123f	fuee1501123f	ADJ
fuelectenerg-402	2	8	temperature	temperature	NOUN
fuelectenerg-402	2	9	measurement	measurement	NOUN
fuelectenerg-402	2	10	performance	performance	NOUN
fuelectenerg-402	2	11	of	of	ADP
fuelectenerg-402	2	12	silicon	silicon	NOUN
fuelectenerg-402	2	13	piezoresistive	piezoresistive	ADJ
fuelectenerg-402	2	14	mems	mem	NOUN
fuelectenerg-402	2	15	pressure	pressure	NOUN
fuelectenerg-402	2	16	sensors	sensor	NOUN
fuelectenerg-402	2	17	for	for	ADP
fuelectenerg-402	2	18	industrial	industrial	ADJ
fuelectenerg-402	2	19	applications	application	NOUN
fuelectenerg-402	2	20			PUNCT
fuelectenerg-402	2	21	miloš	miloš	NOUN
fuelectenerg-402	2	22	frantlović	frantlović	NOUN
fuelectenerg-402	2	23	1,2	1,2	NUM
fuelectenerg-402	2	24	,	,	PUNCT
fuelectenerg-402	2	25	ivana	ivana	PROPN
fuelectenerg-402	2	26	jokić	jokić	PROPN
fuelectenerg-402	2	27	1,2	1,2	NUM
fuelectenerg-402	2	28	,	,	PUNCT
fuelectenerg-402	2	29	žarko	žarko	PROPN
fuelectenerg-402	2	30	lazić	lazić	PROPN
fuelectenerg-402	2	31	2	2	NUM
fuelectenerg-402	2	32	,	,	PUNCT
fuelectenerg-402	2	33	branko	branko	NOUN
fuelectenerg-402	2	34	vukelić	vukelić	NOUN
fuelectenerg-402	2	35	1,2	1,2	NUM
fuelectenerg-402	2	36	,	,	PUNCT
fuelectenerg-402	2	37	marko	marko	PROPN
fuelectenerg-402	2	38	obradov	obradov	PROPN
fuelectenerg-402	2	39	1,2	1,2	NUM
fuelectenerg-402	2	40	,	,	PUNCT
fuelectenerg-402	2	41	dana	dana	PROPN
fuelectenerg-402	2	42	vasiljević	vasiljević	PROPN
fuelectenerg-402	2	43	-	-	PUNCT
fuelectenerg-402	2	44	radović	radović	NOUN
fuelectenerg-402	2	45	2	2	NUM
fuelectenerg-402	2	46	,	,	PUNCT
fuelectenerg-402	2	47	srđan	srđan	ADJ
fuelectenerg-402	2	48	stanković	stanković	NOUN
fuelectenerg-402	2	49	1	1	NUM
fuelectenerg-402	2	50	1	1	NUM
fuelectenerg-402	2	51	school	school	NOUN
fuelectenerg-402	2	52	of	of	ADP
fuelectenerg-402	2	53	electrical	electrical	ADJ
fuelectenerg-402	2	54	engineering	engineering	NOUN
fuelectenerg-402	2	55	,	,	PUNCT
fuelectenerg-402	2	56	university	university	PROPN
fuelectenerg-402	2	57	of	of	ADP
fuelectenerg-402	2	58	belgrade	belgrade	PROPN
fuelectenerg-402	2	59	,	,	PUNCT
fuelectenerg-402	2	60	serbia	serbia	PROPN
fuelectenerg-402	2	61	2	2	NUM
fuelectenerg-402	2	62	ictm	ictm	ADJ
fuelectenerg-402	2	63	–	–	PUNCT
fuelectenerg-402	2	64	center	center	NOUN
fuelectenerg-402	2	65	of	of	ADP
fuelectenerg-402	2	66	microelectronic	microelectronic	ADJ
fuelectenerg-402	2	67	technologies	technology	NOUN
fuelectenerg-402	2	68	,	,	PUNCT
fuelectenerg-402	2	69	university	university	PROPN
fuelectenerg-402	2	70	of	of	ADP
fuelectenerg-402	2	71	belgrade	belgrade	PROPN
fuelectenerg-402	2	72	,	,	PUNCT
fuelectenerg-402	2	73	serbia	serbia	PROPN
fuelectenerg-402	2	74	abstract	abstract	ADJ
fuelectenerg-402	2	75	.	.	PUNCT
fuelectenerg-402	3	1	temperature	temperature	NOUN
fuelectenerg-402	3	2	and	and	CCONJ
fuelectenerg-402	3	3	pressure	pressure	NOUN
fuelectenerg-402	3	4	are	be	AUX
fuelectenerg-402	3	5	the	the	DET
fuelectenerg-402	3	6	most	most	ADV
fuelectenerg-402	3	7	common	common	ADJ
fuelectenerg-402	3	8	parameters	parameter	NOUN
fuelectenerg-402	3	9	to	to	PART
fuelectenerg-402	3	10	be	be	AUX
fuelectenerg-402	3	11	measured	measure	VERB
fuelectenerg-402	3	12	and	and	CCONJ
fuelectenerg-402	3	13	monitored	monitor	VERB
fuelectenerg-402	3	14	not	not	PART
fuelectenerg-402	3	15	only	only	ADV
fuelectenerg-402	3	16	in	in	ADP
fuelectenerg-402	3	17	industrial	industrial	ADJ
fuelectenerg-402	3	18	processes	process	NOUN
fuelectenerg-402	3	19	but	but	CCONJ
fuelectenerg-402	3	20	in	in	ADP
fuelectenerg-402	3	21	many	many	ADJ
fuelectenerg-402	3	22	other	other	ADJ
fuelectenerg-402	3	23	fields	field	NOUN
fuelectenerg-402	3	24	from	from	ADP
fuelectenerg-402	3	25	vehicles	vehicle	NOUN
fuelectenerg-402	3	26	and	and	CCONJ
fuelectenerg-402	3	27	healthcare	healthcare	NOUN
fuelectenerg-402	3	28	to	to	ADP
fuelectenerg-402	3	29	household	household	NOUN
fuelectenerg-402	3	30	appliances	appliance	NOUN
fuelectenerg-402	3	31	.	.	PUNCT
fuelectenerg-402	4	1	silicon	silicon	NOUN
fuelectenerg-402	4	2	microelectromechanical	microelectromechanical	ADJ
fuelectenerg-402	4	3	(	(	PUNCT
fuelectenerg-402	4	4	mems	mem	NOUN
fuelectenerg-402	4	5	)	)	PUNCT
fuelectenerg-402	4	6	piezoresistive	piezoresistive	ADJ
fuelectenerg-402	4	7	pressure	pressure	NOUN
fuelectenerg-402	4	8	sensors	sensor	NOUN
fuelectenerg-402	4	9	are	be	AUX
fuelectenerg-402	4	10	the	the	DET
fuelectenerg-402	4	11	first	first	ADJ
fuelectenerg-402	4	12	and	and	CCONJ
fuelectenerg-402	4	13	the	the	DET
fuelectenerg-402	4	14	most	most	ADV
fuelectenerg-402	4	15	successful	successful	ADJ
fuelectenerg-402	4	16	mems	mem	NOUN
fuelectenerg-402	4	17	sensors	sensor	NOUN
fuelectenerg-402	4	18	,	,	PUNCT
fuelectenerg-402	4	19	offering	offer	VERB
fuelectenerg-402	4	20	high	high	ADJ
fuelectenerg-402	4	21	sensitivity	sensitivity	NOUN
fuelectenerg-402	4	22	,	,	PUNCT
fuelectenerg-402	4	23	solid	solid	ADJ
fuelectenerg-402	4	24	-	-	PUNCT
fuelectenerg-402	4	25	state	state	NOUN
fuelectenerg-402	4	26	reliability	reliability	NOUN
fuelectenerg-402	4	27	and	and	CCONJ
fuelectenerg-402	4	28	small	small	ADJ
fuelectenerg-402	4	29	dimensions	dimension	NOUN
fuelectenerg-402	4	30	at	at	ADP
fuelectenerg-402	4	31	a	a	DET
fuelectenerg-402	4	32	low	low	ADJ
fuelectenerg-402	4	33	cost	cost	NOUN
fuelectenerg-402	4	34	achieved	achieve	VERB
fuelectenerg-402	4	35	by	by	ADP
fuelectenerg-402	4	36	mass	mass	NOUN
fuelectenerg-402	4	37	production	production	NOUN
fuelectenerg-402	4	38	.	.	PUNCT
fuelectenerg-402	5	1	the	the	DET
fuelectenerg-402	5	2	inherent	inherent	ADJ
fuelectenerg-402	5	3	temperature	temperature	NOUN
fuelectenerg-402	5	4	dependence	dependence	NOUN
fuelectenerg-402	5	5	of	of	ADP
fuelectenerg-402	5	6	the	the	DET
fuelectenerg-402	5	7	output	output	NOUN
fuelectenerg-402	5	8	signal	signal	NOUN
fuelectenerg-402	5	9	of	of	ADP
fuelectenerg-402	5	10	such	such	ADJ
fuelectenerg-402	5	11	sensors	sensor	NOUN
fuelectenerg-402	5	12	adversely	adversely	ADV
fuelectenerg-402	5	13	affects	affect	VERB
fuelectenerg-402	5	14	their	their	PRON
fuelectenerg-402	5	15	pressure	pressure	NOUN
fuelectenerg-402	5	16	measurement	measurement	NOUN
fuelectenerg-402	5	17	performance	performance	NOUN
fuelectenerg-402	5	18	,	,	PUNCT
fuelectenerg-402	5	19	necessitating	necessitate	VERB
fuelectenerg-402	5	20	the	the	DET
fuelectenerg-402	5	21	use	use	NOUN
fuelectenerg-402	5	22	of	of	ADP
fuelectenerg-402	5	23	correction	correction	NOUN
fuelectenerg-402	5	24	methods	method	NOUN
fuelectenerg-402	5	25	in	in	ADP
fuelectenerg-402	5	26	a	a	DET
fuelectenerg-402	5	27	majority	majority	NOUN
fuelectenerg-402	5	28	of	of	ADP
fuelectenerg-402	5	29	cases	case	NOUN
fuelectenerg-402	5	30	.	.	PUNCT
fuelectenerg-402	6	1	however	however	ADV
fuelectenerg-402	6	2	,	,	PUNCT
fuelectenerg-402	6	3	the	the	DET
fuelectenerg-402	6	4	same	same	ADJ
fuelectenerg-402	6	5	effect	effect	NOUN
fuelectenerg-402	6	6	can	can	AUX
fuelectenerg-402	6	7	be	be	AUX
fuelectenerg-402	6	8	utilized	utilize	VERB
fuelectenerg-402	6	9	for	for	ADP
fuelectenerg-402	6	10	temperature	temperature	NOUN
fuelectenerg-402	6	11	measurement	measurement	NOUN
fuelectenerg-402	6	12	,	,	PUNCT
fuelectenerg-402	6	13	thus	thus	ADV
fuelectenerg-402	6	14	enabling	enable	VERB
fuelectenerg-402	6	15	new	new	ADJ
fuelectenerg-402	6	16	sensor	sensor	NOUN
fuelectenerg-402	6	17	applications	application	NOUN
fuelectenerg-402	6	18	.	.	PUNCT
fuelectenerg-402	7	1	in	in	ADP
fuelectenerg-402	7	2	this	this	DET
fuelectenerg-402	7	3	paper	paper	NOUN
fuelectenerg-402	7	4	we	we	PRON
fuelectenerg-402	7	5	perform	perform	VERB
fuelectenerg-402	7	6	characterization	characterization	NOUN
fuelectenerg-402	7	7	of	of	ADP
fuelectenerg-402	7	8	mems	mem	NOUN
fuelectenerg-402	7	9	piezoresistive	piezoresistive	ADJ
fuelectenerg-402	7	10	pressure	pressure	NOUN
fuelectenerg-402	7	11	sensors	sensor	NOUN
fuelectenerg-402	7	12	for	for	ADP
fuelectenerg-402	7	13	temperature	temperature	NOUN
fuelectenerg-402	7	14	measurement	measurement	NOUN
fuelectenerg-402	7	15	,	,	PUNCT
fuelectenerg-402	7	16	propose	propose	VERB
fuelectenerg-402	7	17	a	a	DET
fuelectenerg-402	7	18	sensor	sensor	NOUN
fuelectenerg-402	7	19	correction	correction	NOUN
fuelectenerg-402	7	20	method	method	NOUN
fuelectenerg-402	7	21	,	,	PUNCT
fuelectenerg-402	7	22	and	and	CCONJ
fuelectenerg-402	7	23	demonstrate	demonstrate	VERB
fuelectenerg-402	7	24	that	that	SCONJ
fuelectenerg-402	7	25	the	the	DET
fuelectenerg-402	7	26	measurement	measurement	NOUN
fuelectenerg-402	7	27	error	error	NOUN
fuelectenerg-402	7	28	as	as	ADV
fuelectenerg-402	7	29	low	low	ADJ
fuelectenerg-402	7	30	as	as	ADP
fuelectenerg-402	7	31	±	±	NUM
fuelectenerg-402	7	32	0.3	0.3	NUM
fuelectenerg-402	7	33	°	°	SYM
fuelectenerg-402	7	34	c	c	NOUN
fuelectenerg-402	7	35	can	can	AUX
fuelectenerg-402	7	36	be	be	AUX
fuelectenerg-402	7	37	achieved	achieve	VERB
fuelectenerg-402	7	38	.	.	PUNCT
fuelectenerg-402	8	1	key	key	ADJ
fuelectenerg-402	8	2	words	word	NOUN
fuelectenerg-402	8	3	:	:	PUNCT
fuelectenerg-402	8	4	mems	mem	NOUN
fuelectenerg-402	8	5	sensor	sensor	NOUN
fuelectenerg-402	8	6	,	,	PUNCT
fuelectenerg-402	8	7	temperature	temperature	NOUN
fuelectenerg-402	8	8	measurement	measurement	NOUN
fuelectenerg-402	8	9	,	,	PUNCT
fuelectenerg-402	8	10	sensor	sensor	NOUN
fuelectenerg-402	8	11	correction	correction	NOUN
fuelectenerg-402	8	12	1	1	NUM
fuelectenerg-402	8	13	.	.	PUNCT
fuelectenerg-402	8	14	introduction	introduction	NOUN
fuelectenerg-402	8	15	the	the	DET
fuelectenerg-402	8	16	most	most	ADV
fuelectenerg-402	8	17	commonly	commonly	ADV
fuelectenerg-402	8	18	used	use	VERB
fuelectenerg-402	8	19	temperature	temperature	NOUN
fuelectenerg-402	8	20	sensors	sensor	NOUN
fuelectenerg-402	8	21	for	for	ADP
fuelectenerg-402	8	22	contact	contact	NOUN
fuelectenerg-402	8	23	temperature	temperature	NOUN
fuelectenerg-402	8	24	measurement	measurement	NOUN
fuelectenerg-402	8	25	in	in	ADP
fuelectenerg-402	8	26	industrial	industrial	ADJ
fuelectenerg-402	8	27	processes	process	NOUN
fuelectenerg-402	8	28	are	be	AUX
fuelectenerg-402	8	29	those	those	PRON
fuelectenerg-402	8	30	based	base	VERB
fuelectenerg-402	8	31	on	on	ADP
fuelectenerg-402	8	32	seebeck	seebeck	PROPN
fuelectenerg-402	8	33	effect	effect	PROPN
fuelectenerg-402	8	34	(	(	PUNCT
fuelectenerg-402	8	35	thermocouples	thermocouple	NOUN
fuelectenerg-402	8	36	)	)	PUNCT
fuelectenerg-402	8	37	,	,	PUNCT
fuelectenerg-402	8	38	and	and	CCONJ
fuelectenerg-402	8	39	those	those	PRON
fuelectenerg-402	8	40	based	base	VERB
fuelectenerg-402	8	41	on	on	ADP
fuelectenerg-402	8	42	the	the	DET
fuelectenerg-402	8	43	temperature	temperature	NOUN
fuelectenerg-402	8	44	dependent	dependent	ADJ
fuelectenerg-402	8	45	resistance	resistance	NOUN
fuelectenerg-402	8	46	of	of	ADP
fuelectenerg-402	8	47	platinum	platinum	NOUN
fuelectenerg-402	8	48	(	(	PUNCT
fuelectenerg-402	8	49	resistance	resistance	NOUN
fuelectenerg-402	8	50	temperature	temperature	NOUN
fuelectenerg-402	8	51	detectors	detector	NOUN
fuelectenerg-402	8	52	–	–	PUNCT
fuelectenerg-402	8	53	rtds	rtds	NOUN
fuelectenerg-402	8	54	)	)	PUNCT
fuelectenerg-402	8	55	.	.	PUNCT
fuelectenerg-402	9	1	the	the	DET
fuelectenerg-402	9	2	former	former	ADJ
fuelectenerg-402	9	3	do	do	AUX
fuelectenerg-402	9	4	not	not	PART
fuelectenerg-402	9	5	offer	offer	VERB
fuelectenerg-402	9	6	high	high	ADJ
fuelectenerg-402	9	7	accuracy	accuracy	NOUN
fuelectenerg-402	9	8	(	(	PUNCT
fuelectenerg-402	9	9	worse	bad	ADJ
fuelectenerg-402	9	10	than	than	ADP
fuelectenerg-402	9	11	±	±	NUM
fuelectenerg-402	9	12	0.5	0.5	NUM
fuelectenerg-402	9	13	°	°	ADP
fuelectenerg-402	9	14	c	c	NOUN
fuelectenerg-402	9	15	)	)	PUNCT
fuelectenerg-402	9	16	,	,	PUNCT
fuelectenerg-402	9	17	but	but	CCONJ
fuelectenerg-402	9	18	have	have	VERB
fuelectenerg-402	9	19	the	the	DET
fuelectenerg-402	9	20	widest	wide	ADJ
fuelectenerg-402	9	21	temperature	temperature	NOUN
fuelectenerg-402	9	22	range	range	NOUN
fuelectenerg-402	9	23	,	,	PUNCT
fuelectenerg-402	9	24	while	while	SCONJ
fuelectenerg-402	9	25	the	the	DET
fuelectenerg-402	9	26	latter	latter	NOUN
fuelectenerg-402	9	27	can	can	AUX
fuelectenerg-402	9	28	be	be	AUX
fuelectenerg-402	9	29	of	of	ADP
fuelectenerg-402	9	30	very	very	ADV
fuelectenerg-402	9	31	high	high	ADJ
fuelectenerg-402	9	32	performance	performance	NOUN
fuelectenerg-402	9	33	(	(	PUNCT
fuelectenerg-402	9	34	better	well	ADJ
fuelectenerg-402	9	35	than	than	ADP
fuelectenerg-402	9	36	±	±	NUM
fuelectenerg-402	9	37	0.05	0.05	NUM
fuelectenerg-402	9	38	°	°	ADP
fuelectenerg-402	9	39	c	c	NOUN
fuelectenerg-402	9	40	for	for	ADP
fuelectenerg-402	9	41	standard	standard	ADJ
fuelectenerg-402	9	42	platinum	platinum	NOUN
fuelectenerg-402	9	43	resistance	resistance	NOUN
fuelectenerg-402	9	44	thermometers	thermometer	NOUN
fuelectenerg-402	9	45	–	–	PUNCT
fuelectenerg-402	9	46	sprts	sprt	NOUN
fuelectenerg-402	9	47	)	)	PUNCT
fuelectenerg-402	9	48	.	.	PUNCT
fuelectenerg-402	10	1	in	in	ADP
fuelectenerg-402	10	2	a	a	DET
fuelectenerg-402	10	3	typical	typical	ADJ
fuelectenerg-402	10	4	industrial	industrial	ADJ
fuelectenerg-402	10	5	plant	plant	NOUN
fuelectenerg-402	10	6	both	both	CCONJ
fuelectenerg-402	10	7	temperature	temperature	NOUN
fuelectenerg-402	10	8	and	and	CCONJ
fuelectenerg-402	10	9	pressure	pressure	NOUN
fuelectenerg-402	10	10	measurements	measurement	NOUN
fuelectenerg-402	10	11	are	be	AUX
fuelectenerg-402	10	12	required	require	VERB
fuelectenerg-402	10	13	at	at	ADP
fuelectenerg-402	10	14	various	various	ADJ
fuelectenerg-402	10	15	points	point	NOUN
fuelectenerg-402	10	16	of	of	ADP
fuelectenerg-402	10	17	the	the	DET
fuelectenerg-402	10	18	process	process	NOUN
fuelectenerg-402	10	19	,	,	PUNCT
fuelectenerg-402	10	20	often	often	ADV
fuelectenerg-402	10	21	at	at	ADP
fuelectenerg-402	10	22	remote	remote	ADJ
fuelectenerg-402	10	23	locations	location	NOUN
fuelectenerg-402	10	24	,	,	PUNCT
fuelectenerg-402	10	25	while	while	SCONJ
fuelectenerg-402	10	26	monitoring	monitoring	NOUN
fuelectenerg-402	10	27	and	and	CCONJ
fuelectenerg-402	10	28	control	control	NOUN
fuelectenerg-402	10	29	functions	function	NOUN
fuelectenerg-402	10	30	are	be	AUX
fuelectenerg-402	10	31	centralized	centralize	VERB
fuelectenerg-402	10	32	.	.	PUNCT
fuelectenerg-402	11	1	industrial	industrial	ADJ
fuelectenerg-402	11	2	telemetry	telemetry	NOUN
fuelectenerg-402	11	3	relies	rely	VERB
fuelectenerg-402	11	4	on	on	ADP
fuelectenerg-402	11	5	the	the	DET
fuelectenerg-402	11	6	use	use	NOUN
fuelectenerg-402	11	7	of	of	ADP
fuelectenerg-402	11	8	a	a	DET
fuelectenerg-402	11	9	special	special	ADJ
fuelectenerg-402	11	10	kind	kind	NOUN
fuelectenerg-402	11	11	of	of	ADP
fuelectenerg-402	11	12	received	receive	VERB
fuelectenerg-402	11	13	august	august	PROPN
fuelectenerg-402	11	14	8	8	NUM
fuelectenerg-402	11	15	,	,	PUNCT
fuelectenerg-402	11	16	2014	2014	NUM
fuelectenerg-402	11	17	;	;	PUNCT
fuelectenerg-402	11	18	received	receive	VERB
fuelectenerg-402	11	19	in	in	ADP
fuelectenerg-402	11	20	revised	revise	VERB
fuelectenerg-402	11	21	form	form	NOUN
fuelectenerg-402	11	22	december	december	PROPN
fuelectenerg-402	11	23	3	3	NUM
fuelectenerg-402	11	24	,	,	PUNCT
fuelectenerg-402	11	25	2014	2014	NUM
fuelectenerg-402	11	26	corresponding	correspond	VERB
fuelectenerg-402	11	27	author	author	NOUN
fuelectenerg-402	11	28	:	:	PUNCT
fuelectenerg-402	11	29	miloš	miloš	ADJ
fuelectenerg-402	11	30	frantlović	frantlović	ADJ
fuelectenerg-402	11	31	school	school	NOUN
fuelectenerg-402	11	32	of	of	ADP
fuelectenerg-402	11	33	electrical	electrical	ADJ
fuelectenerg-402	11	34	engineering	engineering	NOUN
fuelectenerg-402	11	35	,	,	PUNCT
fuelectenerg-402	11	36	university	university	PROPN
fuelectenerg-402	11	37	of	of	ADP
fuelectenerg-402	11	38	belgrade	belgrade	PROPN
fuelectenerg-402	11	39	,	,	PUNCT
fuelectenerg-402	12	1	bulevar	bulevar	PROPN
fuelectenerg-402	12	2	kralja	kralja	NOUN
fuelectenerg-402	12	3	aleksandra	aleksandra	PROPN
fuelectenerg-402	12	4	73	73	NUM
fuelectenerg-402	12	5	,	,	PUNCT
fuelectenerg-402	12	6	11000	11000	NUM
fuelectenerg-402	12	7	belgrade	belgrade	NOUN
fuelectenerg-402	12	8	,	,	PUNCT
fuelectenerg-402	12	9	serbia	serbia	PROPN
fuelectenerg-402	12	10	(	(	PUNCT
fuelectenerg-402	12	11	e	e	NOUN
fuelectenerg-402	12	12	-	-	NOUN
fuelectenerg-402	12	13	mail	mail	NOUN
fuelectenerg-402	12	14	:	:	PUNCT
fuelectenerg-402	12	15	frant@nanosys.ihtm.bg.ac.rs	frant@nanosys.ihtm.bg.ac.rs	PROPN
fuelectenerg-402	12	16	)	)	PUNCT
fuelectenerg-402	12	17	124	124	NUM
fuelectenerg-402	12	18	m.	m.	NOUN
fuelectenerg-402	12	19	frantlović	frantlović	NOUN
fuelectenerg-402	12	20	,	,	PUNCT
fuelectenerg-402	12	21	i.	i.	PROPN
fuelectenerg-402	12	22	jokić	jokić	PROPN
fuelectenerg-402	12	23	,	,	PUNCT
fuelectenerg-402	12	24	ž	ž	PROPN
fuelectenerg-402	12	25	.	.	PUNCT
fuelectenerg-402	12	26	lazić	lazić	PROPN
fuelectenerg-402	12	27	,	,	PUNCT
fuelectenerg-402	12	28	et	et	PROPN
fuelectenerg-402	12	29	al	al	PROPN
fuelectenerg-402	12	30	.	.	PUNCT
fuelectenerg-402	12	31	industrial	industrial	ADJ
fuelectenerg-402	12	32	-	-	PUNCT
fuelectenerg-402	12	33	grade	grade	NOUN
fuelectenerg-402	12	34	instruments	instrument	NOUN
fuelectenerg-402	12	35	able	able	ADJ
fuelectenerg-402	12	36	to	to	PART
fuelectenerg-402	12	37	transmit	transmit	VERB
fuelectenerg-402	12	38	their	their	PRON
fuelectenerg-402	12	39	measurement	measurement	NOUN
fuelectenerg-402	12	40	indication	indication	NOUN
fuelectenerg-402	12	41	in	in	ADP
fuelectenerg-402	12	42	the	the	DET
fuelectenerg-402	12	43	form	form	NOUN
fuelectenerg-402	12	44	of	of	ADP
fuelectenerg-402	12	45	an	an	DET
fuelectenerg-402	12	46	electrical	electrical	ADJ
fuelectenerg-402	12	47	signal	signal	NOUN
fuelectenerg-402	12	48	from	from	ADP
fuelectenerg-402	12	49	the	the	DET
fuelectenerg-402	12	50	measurement	measurement	NOUN
fuelectenerg-402	12	51	site	site	NOUN
fuelectenerg-402	12	52	to	to	ADP
fuelectenerg-402	12	53	the	the	DET
fuelectenerg-402	12	54	control	control	NOUN
fuelectenerg-402	12	55	room	room	NOUN
fuelectenerg-402	12	56	,	,	PUNCT
fuelectenerg-402	12	57	and	and	CCONJ
fuelectenerg-402	12	58	therefore	therefore	ADV
fuelectenerg-402	12	59	called	call	VERB
fuelectenerg-402	12	60	industrial	industrial	ADJ
fuelectenerg-402	12	61	transmitters	transmitter	NOUN
fuelectenerg-402	12	62	.	.	PUNCT
fuelectenerg-402	13	1	during	during	ADP
fuelectenerg-402	13	2	the	the	DET
fuelectenerg-402	13	3	past	past	ADJ
fuelectenerg-402	13	4	three	three	NUM
fuelectenerg-402	13	5	decades	decade	NOUN
fuelectenerg-402	13	6	,	,	PUNCT
fuelectenerg-402	13	7	industrial	industrial	ADJ
fuelectenerg-402	13	8	pressure	pressure	NOUN
fuelectenerg-402	13	9	transmitters	transmitter	NOUN
fuelectenerg-402	13	10	evolved	evolve	VERB
fuelectenerg-402	13	11	from	from	ADP
fuelectenerg-402	13	12	simple	simple	ADJ
fuelectenerg-402	13	13	electronic	electronic	ADJ
fuelectenerg-402	13	14	devices	device	NOUN
fuelectenerg-402	13	15	that	that	PRON
fuelectenerg-402	13	16	perform	perform	VERB
fuelectenerg-402	13	17	analog	analog	NOUN
fuelectenerg-402	13	18	signal	signal	NOUN
fuelectenerg-402	13	19	processing	processing	NOUN
fuelectenerg-402	13	20	and	and	CCONJ
fuelectenerg-402	13	21	generate	generate	VERB
fuelectenerg-402	13	22	an	an	DET
fuelectenerg-402	13	23	analog	analog	ADJ
fuelectenerg-402	13	24	output	output	NOUN
fuelectenerg-402	13	25	signal	signal	NOUN
fuelectenerg-402	13	26	to	to	ADP
fuelectenerg-402	13	27	much	much	ADV
fuelectenerg-402	13	28	more	more	ADV
fuelectenerg-402	13	29	complex	complex	ADJ
fuelectenerg-402	13	30	computerized	computerized	ADJ
fuelectenerg-402	13	31	instruments	instrument	NOUN
fuelectenerg-402	13	32	with	with	ADP
fuelectenerg-402	13	33	two	two	NUM
fuelectenerg-402	13	34	-	-	PUNCT
fuelectenerg-402	13	35	way	way	NOUN
fuelectenerg-402	13	36	digital	digital	ADJ
fuelectenerg-402	13	37	communication	communication	NOUN
fuelectenerg-402	13	38	.	.	PUNCT
fuelectenerg-402	14	1	contemporary	contemporary	ADJ
fuelectenerg-402	14	2	intelligent	intelligent	ADJ
fuelectenerg-402	14	3	pressure	pressure	NOUN
fuelectenerg-402	14	4	transmitters	transmitter	NOUN
fuelectenerg-402	14	5	owe	owe	VERB
fuelectenerg-402	14	6	their	their	PRON
fuelectenerg-402	14	7	high	high	ADJ
fuelectenerg-402	14	8	measurement	measurement	NOUN
fuelectenerg-402	14	9	performance	performance	NOUN
fuelectenerg-402	14	10	to	to	PART
fuelectenerg-402	14	11	sensor	sensor	VERB
fuelectenerg-402	14	12	correction	correction	NOUN
fuelectenerg-402	14	13	techniques	technique	NOUN
fuelectenerg-402	14	14	based	base	VERB
fuelectenerg-402	14	15	on	on	ADP
fuelectenerg-402	14	16	digital	digital	ADJ
fuelectenerg-402	14	17	signal	signal	NOUN
fuelectenerg-402	14	18	processing	processing	NOUN
fuelectenerg-402	14	19	.	.	PUNCT
fuelectenerg-402	15	1	in	in	ADP
fuelectenerg-402	15	2	this	this	DET
fuelectenerg-402	15	3	paper	paper	NOUN
fuelectenerg-402	15	4	we	we	PRON
fuelectenerg-402	15	5	investigate	investigate	VERB
fuelectenerg-402	15	6	the	the	DET
fuelectenerg-402	15	7	possibility	possibility	NOUN
fuelectenerg-402	15	8	of	of	ADP
fuelectenerg-402	15	9	using	use	VERB
fuelectenerg-402	15	10	silicon	silicon	NOUN
fuelectenerg-402	15	11	piezoresistive	piezoresistive	ADJ
fuelectenerg-402	15	12	mems	mem	NOUN
fuelectenerg-402	15	13	pressure	pressure	NOUN
fuelectenerg-402	15	14	sensors	sensor	NOUN
fuelectenerg-402	15	15	for	for	ADP
fuelectenerg-402	15	16	temperature	temperature	NOUN
fuelectenerg-402	15	17	measurement	measurement	NOUN
fuelectenerg-402	15	18	,	,	PUNCT
fuelectenerg-402	15	19	utilizing	utilize	VERB
fuelectenerg-402	15	20	hardware	hardware	NOUN
fuelectenerg-402	15	21	resources	resource	NOUN
fuelectenerg-402	15	22	already	already	ADV
fuelectenerg-402	15	23	existing	exist	VERB
fuelectenerg-402	15	24	in	in	ADP
fuelectenerg-402	15	25	contemporary	contemporary	ADJ
fuelectenerg-402	15	26	intelligent	intelligent	ADJ
fuelectenerg-402	15	27	pressure	pressure	NOUN
fuelectenerg-402	15	28	transmitters	transmitter	NOUN
fuelectenerg-402	15	29	.	.	PUNCT
fuelectenerg-402	16	1	some	some	DET
fuelectenerg-402	16	2	early	early	ADJ
fuelectenerg-402	16	3	results	result	NOUN
fuelectenerg-402	16	4	of	of	ADP
fuelectenerg-402	16	5	our	our	PRON
fuelectenerg-402	16	6	work	work	NOUN
fuelectenerg-402	16	7	were	be	AUX
fuelectenerg-402	16	8	presented	present	VERB
fuelectenerg-402	16	9	in	in	ADP
fuelectenerg-402	16	10	ref	ref	NOUN
fuelectenerg-402	16	11	.	.	PUNCT
fuelectenerg-402	17	1	[	[	X
fuelectenerg-402	17	2	1	1	NUM
fuelectenerg-402	17	3	]	]	PUNCT
fuelectenerg-402	17	4	,	,	PUNCT
fuelectenerg-402	17	5	while	while	SCONJ
fuelectenerg-402	17	6	this	this	DET
fuelectenerg-402	17	7	paper	paper	NOUN
fuelectenerg-402	17	8	contains	contain	VERB
fuelectenerg-402	17	9	more	more	ADV
fuelectenerg-402	17	10	comprehensive	comprehensive	ADJ
fuelectenerg-402	17	11	information	information	NOUN
fuelectenerg-402	17	12	based	base	VERB
fuelectenerg-402	17	13	on	on	ADP
fuelectenerg-402	17	14	measurement	measurement	NOUN
fuelectenerg-402	17	15	data	datum	NOUN
fuelectenerg-402	17	16	obtained	obtain	VERB
fuelectenerg-402	17	17	for	for	ADP
fuelectenerg-402	17	18	a	a	DET
fuelectenerg-402	17	19	new	new	ADJ
fuelectenerg-402	17	20	set	set	NOUN
fuelectenerg-402	17	21	of	of	ADP
fuelectenerg-402	17	22	sensors	sensor	NOUN
fuelectenerg-402	17	23	.	.	PUNCT
fuelectenerg-402	18	1	research	research	NOUN
fuelectenerg-402	18	2	of	of	ADP
fuelectenerg-402	18	3	silicon	silicon	NOUN
fuelectenerg-402	18	4	mems	mem	NOUN
fuelectenerg-402	18	5	piezoresistive	piezoresistive	ADJ
fuelectenerg-402	18	6	pressure	pressure	NOUN
fuelectenerg-402	18	7	sensors	sensor	NOUN
fuelectenerg-402	18	8	,	,	PUNCT
fuelectenerg-402	18	9	including	include	VERB
fuelectenerg-402	18	10	their	their	PRON
fuelectenerg-402	18	11	design	design	NOUN
fuelectenerg-402	18	12	,	,	PUNCT
fuelectenerg-402	18	13	fabrication	fabrication	NOUN
fuelectenerg-402	18	14	and	and	CCONJ
fuelectenerg-402	18	15	correction	correction	NOUN
fuelectenerg-402	18	16	techniques	technique	NOUN
fuelectenerg-402	18	17	,	,	PUNCT
fuelectenerg-402	18	18	has	have	AUX
fuelectenerg-402	18	19	been	be	AUX
fuelectenerg-402	18	20	performed	perform	VERB
fuelectenerg-402	18	21	at	at	ADP
fuelectenerg-402	18	22	the	the	DET
fuelectenerg-402	18	23	center	center	NOUN
fuelectenerg-402	18	24	of	of	ADP
fuelectenerg-402	18	25	microelectronic	microelectronic	ADJ
fuelectenerg-402	18	26	technologies	technology	NOUN
fuelectenerg-402	18	27	(	(	PUNCT
fuelectenerg-402	18	28	cmt	cmt	PROPN
fuelectenerg-402	18	29	)	)	PUNCT
fuelectenerg-402	18	30	for	for	ADP
fuelectenerg-402	18	31	more	more	ADJ
fuelectenerg-402	18	32	than	than	ADP
fuelectenerg-402	18	33	25	25	NUM
fuelectenerg-402	18	34	years	year	NOUN
fuelectenerg-402	19	1	[	[	X
fuelectenerg-402	19	2	2]-[11	2]-[11	X
fuelectenerg-402	19	3	]	]	X
fuelectenerg-402	19	4	.	.	PUNCT
fuelectenerg-402	20	1	one	one	NUM
fuelectenerg-402	20	2	of	of	ADP
fuelectenerg-402	20	3	the	the	DET
fuelectenerg-402	20	4	successful	successful	ADJ
fuelectenerg-402	20	5	types	type	NOUN
fuelectenerg-402	20	6	of	of	ADP
fuelectenerg-402	20	7	pressure	pressure	NOUN
fuelectenerg-402	20	8	sensing	sense	VERB
fuelectenerg-402	20	9	elements	element	NOUN
fuelectenerg-402	20	10	developed	develop	VERB
fuelectenerg-402	20	11	and	and	CCONJ
fuelectenerg-402	20	12	fabricated	fabricate	VERB
fuelectenerg-402	20	13	at	at	ADP
fuelectenerg-402	20	14	cmt	cmt	PROPN
fuelectenerg-402	20	15	is	be	AUX
fuelectenerg-402	20	16	the	the	DET
fuelectenerg-402	20	17	sp-9	sp-9	ADJ
fuelectenerg-402	20	18	,	,	PUNCT
fuelectenerg-402	20	19	which	which	PRON
fuelectenerg-402	20	20	was	be	AUX
fuelectenerg-402	20	21	chosen	choose	VERB
fuelectenerg-402	20	22	for	for	ADP
fuelectenerg-402	20	23	this	this	DET
fuelectenerg-402	20	24	work	work	NOUN
fuelectenerg-402	20	25	.	.	PUNCT
fuelectenerg-402	21	1	it	it	PRON
fuelectenerg-402	21	2	is	be	AUX
fuelectenerg-402	21	3	intended	intend	VERB
fuelectenerg-402	21	4	for	for	ADP
fuelectenerg-402	21	5	measurement	measurement	NOUN
fuelectenerg-402	21	6	of	of	ADP
fuelectenerg-402	21	7	absolute	absolute	ADJ
fuelectenerg-402	21	8	or	or	CCONJ
fuelectenerg-402	21	9	relative	relative	ADJ
fuelectenerg-402	21	10	pressure	pressure	NOUN
fuelectenerg-402	21	11	in	in	ADP
fuelectenerg-402	21	12	the	the	DET
fuelectenerg-402	21	13	range	range	NOUN
fuelectenerg-402	21	14	from	from	ADP
fuelectenerg-402	21	15	0.5	0.5	NUM
fuelectenerg-402	21	16	bar	bar	NOUN
fuelectenerg-402	21	17	to	to	ADP
fuelectenerg-402	21	18	50	50	NUM
fuelectenerg-402	21	19	bar	bar	NOUN
fuelectenerg-402	21	20	.	.	PUNCT
fuelectenerg-402	22	1	the	the	DET
fuelectenerg-402	22	2	base	base	NOUN
fuelectenerg-402	22	3	material	material	NOUN
fuelectenerg-402	22	4	used	use	VERB
fuelectenerg-402	22	5	for	for	ADP
fuelectenerg-402	22	6	its	its	PRON
fuelectenerg-402	22	7	fabrication	fabrication	NOUN
fuelectenerg-402	22	8	is	be	AUX
fuelectenerg-402	22	9	a	a	DET
fuelectenerg-402	22	10	double	double	ADJ
fuelectenerg-402	22	11	sided	sided	ADJ
fuelectenerg-402	22	12	polished	polished	ADJ
fuelectenerg-402	22	13	single	single	ADJ
fuelectenerg-402	22	14	crystal	crystal	NOUN
fuelectenerg-402	22	15	n	n	CCONJ
fuelectenerg-402	22	16	-	-	PUNCT
fuelectenerg-402	22	17	type	type	NOUN
fuelectenerg-402	22	18	silicon	silicon	NOUN
fuelectenerg-402	22	19	wafer	wafer	NOUN
fuelectenerg-402	22	20	(	(	PUNCT
fuelectenerg-402	22	21	specific	specific	ADJ
fuelectenerg-402	22	22	resistivity	resistivity	NOUN
fuelectenerg-402	22	23	from	from	ADP
fuelectenerg-402	22	24	3	3	NUM
fuelectenerg-402	22	25	cm	cm	PROPN
fuelectenerg-402	22	26	to	to	ADP
fuelectenerg-402	22	27	5	5	NUM
fuelectenerg-402	22	28	cm	cm	PROPN
fuelectenerg-402	22	29	)	)	PUNCT
fuelectenerg-402	22	30	.	.	PUNCT
fuelectenerg-402	23	1	four	four	NUM
fuelectenerg-402	23	2	p	p	ADJ
fuelectenerg-402	23	3	-	-	PUNCT
fuelectenerg-402	23	4	type	type	NOUN
fuelectenerg-402	23	5	piezoresistors	piezoresistor	NOUN
fuelectenerg-402	23	6	are	be	AUX
fuelectenerg-402	23	7	formed	form	VERB
fuelectenerg-402	23	8	by	by	ADP
fuelectenerg-402	23	9	boron	boron	NOUN
fuelectenerg-402	23	10	diffusion	diffusion	NOUN
fuelectenerg-402	23	11	on	on	ADP
fuelectenerg-402	23	12	the	the	DET
fuelectenerg-402	23	13	surface	surface	NOUN
fuelectenerg-402	23	14	of	of	ADP
fuelectenerg-402	23	15	the	the	DET
fuelectenerg-402	23	16	silicon	silicon	NOUN
fuelectenerg-402	23	17	substrate	substrate	NOUN
fuelectenerg-402	23	18	,	,	PUNCT
fuelectenerg-402	23	19	constituting	constitute	VERB
fuelectenerg-402	23	20	a	a	DET
fuelectenerg-402	23	21	wheatstone	wheatstone	PROPN
fuelectenerg-402	23	22	bridge	bridge	NOUN
fuelectenerg-402	23	23	.	.	PUNCT
fuelectenerg-402	24	1	two	two	NUM
fuelectenerg-402	24	2	piezoresistors	piezoresistor	NOUN
fuelectenerg-402	24	3	are	be	AUX
fuelectenerg-402	24	4	in	in	ADP
fuelectenerg-402	24	5	the	the	DET
fuelectenerg-402	24	6	radial	radial	ADJ
fuelectenerg-402	24	7	direction	direction	NOUN
fuelectenerg-402	24	8	and	and	CCONJ
fuelectenerg-402	24	9	the	the	DET
fuelectenerg-402	24	10	remaining	remain	VERB
fuelectenerg-402	24	11	two	two	NUM
fuelectenerg-402	24	12	in	in	ADP
fuelectenerg-402	24	13	the	the	DET
fuelectenerg-402	24	14	transversal	transversal	ADJ
fuelectenerg-402	24	15	direction	direction	NOUN
fuelectenerg-402	24	16	relative	relative	ADJ
fuelectenerg-402	24	17	to	to	ADP
fuelectenerg-402	24	18	the	the	DET
fuelectenerg-402	24	19	edges	edge	NOUN
fuelectenerg-402	24	20	of	of	ADP
fuelectenerg-402	24	21	a	a	DET
fuelectenerg-402	24	22	micromachined	micromachined	ADJ
fuelectenerg-402	24	23	diaphragm	diaphragm	NOUN
fuelectenerg-402	24	24	.	.	PUNCT
fuelectenerg-402	25	1	the	the	DET
fuelectenerg-402	25	2	diaphragm	diaphragm	PROPN
fuelectenerg-402	25	3	is	be	AUX
fuelectenerg-402	25	4	square	square	ADJ
fuelectenerg-402	25	5	,	,	PUNCT
fuelectenerg-402	25	6	2×2	2×2	NUM
fuelectenerg-402	25	7	mm	mm	NOUN
fuelectenerg-402	25	8	2	2	NUM
fuelectenerg-402	25	9	in	in	ADP
fuelectenerg-402	25	10	size	size	NOUN
fuelectenerg-402	25	11	,	,	PUNCT
fuelectenerg-402	25	12	fabricated	fabricate	VERB
fuelectenerg-402	25	13	by	by	ADP
fuelectenerg-402	25	14	anisotropic	anisotropic	NOUN
fuelectenerg-402	25	15	etching	etch	VERB
fuelectenerg-402	25	16	of	of	ADP
fuelectenerg-402	25	17	silicon	silicon	NOUN
fuelectenerg-402	25	18	on	on	ADP
fuelectenerg-402	25	19	the	the	DET
fuelectenerg-402	25	20	bottom	bottom	ADJ
fuelectenerg-402	25	21	side	side	NOUN
fuelectenerg-402	25	22	of	of	ADP
fuelectenerg-402	25	23	the	the	DET
fuelectenerg-402	25	24	wafer	wafer	NOUN
fuelectenerg-402	25	25	.	.	PUNCT
fuelectenerg-402	26	1	the	the	DET
fuelectenerg-402	26	2	thickness	thickness	NOUN
fuelectenerg-402	26	3	of	of	ADP
fuelectenerg-402	26	4	the	the	DET
fuelectenerg-402	26	5	diaphragm	diaphragm	NOUN
fuelectenerg-402	26	6	is	be	AUX
fuelectenerg-402	26	7	from	from	ADP
fuelectenerg-402	26	8	43	43	NUM
fuelectenerg-402	26	9	μm	μm	NOUN
fuelectenerg-402	26	10	to	to	ADP
fuelectenerg-402	26	11	160	160	NUM
fuelectenerg-402	26	12	μm	μm	NUM
fuelectenerg-402	26	13	,	,	PUNCT
fuelectenerg-402	26	14	depending	depend	VERB
fuelectenerg-402	26	15	on	on	ADP
fuelectenerg-402	26	16	the	the	DET
fuelectenerg-402	26	17	nominal	nominal	ADJ
fuelectenerg-402	26	18	pressure	pressure	NOUN
fuelectenerg-402	26	19	range	range	NOUN
fuelectenerg-402	26	20	of	of	ADP
fuelectenerg-402	26	21	the	the	DET
fuelectenerg-402	26	22	sensing	sense	VERB
fuelectenerg-402	26	23	element	element	NOUN
fuelectenerg-402	26	24	.	.	PUNCT
fuelectenerg-402	27	1	positions	position	NOUN
fuelectenerg-402	27	2	of	of	ADP
fuelectenerg-402	27	3	the	the	DET
fuelectenerg-402	27	4	piezoresistors	piezoresistor	NOUN
fuelectenerg-402	27	5	are	be	AUX
fuelectenerg-402	27	6	optimized	optimize	VERB
fuelectenerg-402	27	7	for	for	ADP
fuelectenerg-402	27	8	each	each	DET
fuelectenerg-402	27	9	diaphragm	diaphragm	NOUN
fuelectenerg-402	27	10	thickness	thickness	NOUN
fuelectenerg-402	27	11	in	in	ADP
fuelectenerg-402	27	12	order	order	NOUN
fuelectenerg-402	27	13	to	to	PART
fuelectenerg-402	27	14	achieve	achieve	VERB
fuelectenerg-402	27	15	the	the	DET
fuelectenerg-402	27	16	highest	high	ADJ
fuelectenerg-402	27	17	linearity	linearity	NOUN
fuelectenerg-402	27	18	of	of	ADP
fuelectenerg-402	27	19	the	the	DET
fuelectenerg-402	27	20	output	output	NOUN
fuelectenerg-402	27	21	signal	signal	NOUN
fuelectenerg-402	27	22	.	.	PUNCT
fuelectenerg-402	28	1	the	the	DET
fuelectenerg-402	28	2	overall	overall	ADJ
fuelectenerg-402	28	3	size	size	NOUN
fuelectenerg-402	28	4	of	of	ADP
fuelectenerg-402	28	5	the	the	DET
fuelectenerg-402	28	6	sensing	sense	VERB
fuelectenerg-402	28	7	element	element	NOUN
fuelectenerg-402	28	8	die	die	NOUN
fuelectenerg-402	28	9	is	be	AUX
fuelectenerg-402	28	10	3.2×3.2×0.38	3.2×3.2×0.38	NUM
fuelectenerg-402	28	11	mm	mm	INTJ
fuelectenerg-402	28	12	3	3	NUM
fuelectenerg-402	28	13	.	.	PUNCT
fuelectenerg-402	29	1	after	after	ADP
fuelectenerg-402	29	2	the	the	DET
fuelectenerg-402	29	3	fabrication	fabrication	NOUN
fuelectenerg-402	29	4	of	of	ADP
fuelectenerg-402	29	5	the	the	DET
fuelectenerg-402	29	6	die	die	NOUN
fuelectenerg-402	29	7	,	,	PUNCT
fuelectenerg-402	29	8	it	it	PRON
fuelectenerg-402	29	9	is	be	AUX
fuelectenerg-402	29	10	anodically	anodically	ADV
fuelectenerg-402	29	11	bonded	bond	VERB
fuelectenerg-402	29	12	to	to	ADP
fuelectenerg-402	29	13	a	a	DET
fuelectenerg-402	29	14	1.7	1.7	NUM
fuelectenerg-402	29	15	mm	mm	PROPN
fuelectenerg-402	29	16	thick	thick	ADJ
fuelectenerg-402	29	17	glass	glass	NOUN
fuelectenerg-402	29	18	support	support	NOUN
fuelectenerg-402	29	19	.	.	PUNCT
fuelectenerg-402	30	1	if	if	SCONJ
fuelectenerg-402	30	2	a	a	DET
fuelectenerg-402	30	3	sensing	sense	VERB
fuelectenerg-402	30	4	element	element	NOUN
fuelectenerg-402	30	5	is	be	AUX
fuelectenerg-402	30	6	intended	intend	VERB
fuelectenerg-402	30	7	for	for	ADP
fuelectenerg-402	30	8	relative	relative	ADJ
fuelectenerg-402	30	9	pressure	pressure	NOUN
fuelectenerg-402	30	10	measurement	measurement	NOUN
fuelectenerg-402	30	11	,	,	PUNCT
fuelectenerg-402	30	12	there	there	PRON
fuelectenerg-402	30	13	must	must	AUX
fuelectenerg-402	30	14	be	be	AUX
fuelectenerg-402	30	15	a	a	DET
fuelectenerg-402	30	16	channel	channel	NOUN
fuelectenerg-402	30	17	through	through	ADP
fuelectenerg-402	30	18	the	the	DET
fuelectenerg-402	30	19	glass	glass	NOUN
fuelectenerg-402	30	20	support	support	NOUN
fuelectenerg-402	30	21	in	in	ADP
fuelectenerg-402	30	22	order	order	NOUN
fuelectenerg-402	30	23	for	for	ADP
fuelectenerg-402	30	24	the	the	DET
fuelectenerg-402	30	25	fluid	fluid	NOUN
fuelectenerg-402	30	26	at	at	ADP
fuelectenerg-402	30	27	the	the	DET
fuelectenerg-402	30	28	reference	reference	NOUN
fuelectenerg-402	30	29	pressure	pressure	NOUN
fuelectenerg-402	30	30	to	to	PART
fuelectenerg-402	30	31	reach	reach	VERB
fuelectenerg-402	30	32	the	the	DET
fuelectenerg-402	30	33	bottom	bottom	ADJ
fuelectenerg-402	30	34	side	side	NOUN
fuelectenerg-402	30	35	of	of	ADP
fuelectenerg-402	30	36	the	the	DET
fuelectenerg-402	30	37	sensing	sense	VERB
fuelectenerg-402	30	38	element	element	NOUN
fuelectenerg-402	30	39	diaphragm	diaphragm	NOUN
fuelectenerg-402	30	40	.	.	PUNCT
fuelectenerg-402	31	1	a	a	DET
fuelectenerg-402	31	2	photograph	photograph	NOUN
fuelectenerg-402	31	3	of	of	ADP
fuelectenerg-402	31	4	the	the	DET
fuelectenerg-402	31	5	sensing	sense	VERB
fuelectenerg-402	31	6	element	element	NOUN
fuelectenerg-402	31	7	mounted	mount	VERB
fuelectenerg-402	31	8	on	on	ADP
fuelectenerg-402	31	9	a	a	DET
fuelectenerg-402	31	10	to-5	to-5	PUNCT
fuelectenerg-402	31	11	housing	housing	NOUN
fuelectenerg-402	31	12	is	be	AUX
fuelectenerg-402	31	13	shown	show	VERB
fuelectenerg-402	31	14	in	in	ADP
fuelectenerg-402	31	15	fig	fig	NOUN
fuelectenerg-402	31	16	.	.	PUNCT
fuelectenerg-402	32	1	1a	1a	PROPN
fuelectenerg-402	32	2	.	.	PUNCT
fuelectenerg-402	33	1	an	an	DET
fuelectenerg-402	33	2	industrial	industrial	ADJ
fuelectenerg-402	33	3	-	-	PUNCT
fuelectenerg-402	33	4	grade	grade	NOUN
fuelectenerg-402	33	5	pressure	pressure	NOUN
fuelectenerg-402	33	6	sensor	sensor	NOUN
fuelectenerg-402	33	7	consists	consist	VERB
fuelectenerg-402	33	8	of	of	ADP
fuelectenerg-402	33	9	a	a	DET
fuelectenerg-402	33	10	pressure	pressure	NOUN
fuelectenerg-402	33	11	sensing	sense	VERB
fuelectenerg-402	33	12	element	element	NOUN
fuelectenerg-402	33	13	(	(	PUNCT
fuelectenerg-402	33	14	e.g.	e.g.	ADV
fuelectenerg-402	33	15	the	the	DET
fuelectenerg-402	33	16	sp-9	sp-9	ADJ
fuelectenerg-402	33	17	)	)	PUNCT
fuelectenerg-402	33	18	and	and	CCONJ
fuelectenerg-402	33	19	a	a	DET
fuelectenerg-402	33	20	metallic	metallic	ADJ
fuelectenerg-402	33	21	sensor	sensor	NOUN
fuelectenerg-402	33	22	body	body	NOUN
fuelectenerg-402	33	23	that	that	PRON
fuelectenerg-402	33	24	ensures	ensure	VERB
fuelectenerg-402	33	25	optimal	optimal	ADJ
fuelectenerg-402	33	26	operating	operating	NOUN
fuelectenerg-402	33	27	conditions	condition	NOUN
fuelectenerg-402	33	28	for	for	ADP
fuelectenerg-402	33	29	the	the	DET
fuelectenerg-402	33	30	sensing	sense	VERB
fuelectenerg-402	33	31	element	element	NOUN
fuelectenerg-402	33	32	,	,	PUNCT
fuelectenerg-402	33	33	protects	protect	VERB
fuelectenerg-402	33	34	it	it	PRON
fuelectenerg-402	33	35	from	from	ADP
fuelectenerg-402	33	36	damage	damage	NOUN
fuelectenerg-402	33	37	,	,	PUNCT
fuelectenerg-402	33	38	and	and	CCONJ
fuelectenerg-402	33	39	provides	provide	VERB
fuelectenerg-402	33	40	for	for	ADP
fuelectenerg-402	33	41	a	a	DET
fuelectenerg-402	33	42	standardized	standardized	ADJ
fuelectenerg-402	33	43	process	process	NOUN
fuelectenerg-402	33	44	connection	connection	NOUN
fuelectenerg-402	33	45	.	.	PUNCT
fuelectenerg-402	34	1	a	a	DET
fuelectenerg-402	34	2	photograph	photograph	NOUN
fuelectenerg-402	34	3	of	of	ADP
fuelectenerg-402	34	4	an	an	DET
fuelectenerg-402	34	5	industrial	industrial	ADJ
fuelectenerg-402	34	6	pressure	pressure	NOUN
fuelectenerg-402	34	7	sensor	sensor	NOUN
fuelectenerg-402	34	8	based	base	VERB
fuelectenerg-402	34	9	on	on	ADP
fuelectenerg-402	34	10	the	the	DET
fuelectenerg-402	34	11	sp-9	sp-9	VERB
fuelectenerg-402	34	12	sensing	sense	VERB
fuelectenerg-402	34	13	element	element	NOUN
fuelectenerg-402	34	14	is	be	AUX
fuelectenerg-402	34	15	shown	show	VERB
fuelectenerg-402	34	16	in	in	ADP
fuelectenerg-402	34	17	fig	fig	NOUN
fuelectenerg-402	34	18	.	.	PUNCT
fuelectenerg-402	35	1	1b	1b	NUM
fuelectenerg-402	35	2	.	.	PUNCT
fuelectenerg-402	36	1	a	a	DET
fuelectenerg-402	36	2	separation	separation	NOUN
fuelectenerg-402	36	3	membrane	membrane	NOUN
fuelectenerg-402	36	4	,	,	PUNCT
fuelectenerg-402	36	5	located	locate	VERB
fuelectenerg-402	36	6	inside	inside	ADP
fuelectenerg-402	36	7	the	the	DET
fuelectenerg-402	36	8	metallic	metallic	ADJ
fuelectenerg-402	36	9	body	body	NOUN
fuelectenerg-402	36	10	,	,	PUNCT
fuelectenerg-402	36	11	eliminates	eliminate	VERB
fuelectenerg-402	36	12	a	a	DET
fuelectenerg-402	36	13	direct	direct	ADJ
fuelectenerg-402	36	14	contact	contact	NOUN
fuelectenerg-402	36	15	between	between	ADP
fuelectenerg-402	36	16	the	the	DET
fuelectenerg-402	36	17	sensing	sense	VERB
fuelectenerg-402	36	18	element	element	NOUN
fuelectenerg-402	36	19	and	and	CCONJ
fuelectenerg-402	36	20	a	a	DET
fuelectenerg-402	36	21	possibly	possibly	ADV
fuelectenerg-402	36	22	electrically	electrically	ADV
fuelectenerg-402	36	23	conductive	conductive	ADJ
fuelectenerg-402	36	24	,	,	PUNCT
fuelectenerg-402	36	25	chemically	chemically	ADV
fuelectenerg-402	36	26	aggressive	aggressive	ADJ
fuelectenerg-402	36	27	or	or	CCONJ
fuelectenerg-402	36	28	dirty	dirty	ADJ
fuelectenerg-402	36	29	fluid	fluid	NOUN
fuelectenerg-402	36	30	whose	whose	DET
fuelectenerg-402	36	31	pressure	pressure	NOUN
fuelectenerg-402	36	32	is	be	AUX
fuelectenerg-402	36	33	measured	measure	VERB
fuelectenerg-402	36	34	.	.	PUNCT
fuelectenerg-402	37	1	the	the	DET
fuelectenerg-402	37	2	sensing	sense	VERB
fuelectenerg-402	37	3	element	element	NOUN
fuelectenerg-402	37	4	is	be	AUX
fuelectenerg-402	37	5	surrounded	surround	VERB
fuelectenerg-402	37	6	by	by	ADP
fuelectenerg-402	37	7	chemically	chemically	ADV
fuelectenerg-402	37	8	inert	inert	ADJ
fuelectenerg-402	37	9	silicone	silicone	NOUN
fuelectenerg-402	37	10	oil	oil	NOUN
fuelectenerg-402	37	11	which	which	PRON
fuelectenerg-402	37	12	is	be	AUX
fuelectenerg-402	37	13	also	also	ADV
fuelectenerg-402	37	14	a	a	DET
fuelectenerg-402	37	15	good	good	ADJ
fuelectenerg-402	37	16	dielectric	dielectric	NOUN
fuelectenerg-402	37	17	.	.	PUNCT
fuelectenerg-402	38	1	temperature	temperature	NOUN
fuelectenerg-402	38	2	measurement	measurement	NOUN
fuelectenerg-402	38	3	performance	performance	NOUN
fuelectenerg-402	38	4	of	of	ADP
fuelectenerg-402	38	5	silicon	silicon	NOUN
fuelectenerg-402	38	6	piezoresistive	piezoresistive	ADJ
fuelectenerg-402	38	7	mems	mem	NOUN
fuelectenerg-402	38	8	pressure	pressure	NOUN
fuelectenerg-402	38	9	sensors	sensor	NOUN
fuelectenerg-402	38	10	...	...	PUNCT
fuelectenerg-402	38	11	125	125	NUM
fuelectenerg-402	38	12	fig	fig	NOUN
fuelectenerg-402	38	13	.	.	PUNCT
fuelectenerg-402	39	1	1	1	NUM
fuelectenerg-402	39	2	photographs	photograph	NOUN
fuelectenerg-402	39	3	of	of	ADP
fuelectenerg-402	39	4	a	a	DET
fuelectenerg-402	39	5	)	)	PUNCT
fuelectenerg-402	39	6	sp-9	sp-9	ADJ
fuelectenerg-402	39	7	sensing	sense	VERB
fuelectenerg-402	39	8	element	element	NOUN
fuelectenerg-402	39	9	mounted	mount	VERB
fuelectenerg-402	39	10	on	on	ADP
fuelectenerg-402	39	11	a	a	DET
fuelectenerg-402	39	12	to-5	to-5	PUNCT
fuelectenerg-402	39	13	housing	housing	NOUN
fuelectenerg-402	39	14	,	,	PUNCT
fuelectenerg-402	39	15	b	b	NOUN
fuelectenerg-402	39	16	)	)	PUNCT
fuelectenerg-402	39	17	industrial	industrial	ADJ
fuelectenerg-402	39	18	pressure	pressure	NOUN
fuelectenerg-402	39	19	sensor	sensor	NOUN
fuelectenerg-402	39	20	based	base	VERB
fuelectenerg-402	39	21	on	on	ADP
fuelectenerg-402	39	22	the	the	DET
fuelectenerg-402	39	23	sp-9	sp-9	VERB
fuelectenerg-402	39	24	sensing	sense	VERB
fuelectenerg-402	39	25	element	element	NOUN
fuelectenerg-402	39	26	a	a	DET
fuelectenerg-402	39	27	simplified	simplified	ADJ
fuelectenerg-402	39	28	electrical	electrical	ADJ
fuelectenerg-402	39	29	circuit	circuit	NOUN
fuelectenerg-402	39	30	diagram	diagram	NOUN
fuelectenerg-402	39	31	of	of	ADP
fuelectenerg-402	39	32	a	a	DET
fuelectenerg-402	39	33	piezoresistive	piezoresistive	ADJ
fuelectenerg-402	39	34	sensor	sensor	NOUN
fuelectenerg-402	39	35	with	with	ADP
fuelectenerg-402	39	36	current	current	ADJ
fuelectenerg-402	39	37	excitation	excitation	NOUN
fuelectenerg-402	39	38	is	be	AUX
fuelectenerg-402	39	39	shown	show	VERB
fuelectenerg-402	39	40	in	in	ADP
fuelectenerg-402	39	41	fig	fig	NOUN
fuelectenerg-402	39	42	.	.	PUNCT
fuelectenerg-402	40	1	2	2	NUM
fuelectenerg-402	40	2	.	.	X
fuelectenerg-402	40	3	for	for	ADP
fuelectenerg-402	40	4	a	a	DET
fuelectenerg-402	40	5	typical	typical	ADJ
fuelectenerg-402	40	6	sensing	sense	VERB
fuelectenerg-402	40	7	element	element	NOUN
fuelectenerg-402	40	8	made	make	VERB
fuelectenerg-402	40	9	by	by	ADP
fuelectenerg-402	40	10	cmt	cmt	PROPN
fuelectenerg-402	40	11	,	,	PUNCT
fuelectenerg-402	40	12	the	the	DET
fuelectenerg-402	40	13	resistances	resistance	NOUN
fuelectenerg-402	40	14	r1	r1	NOUN
fuelectenerg-402	40	15	,	,	PUNCT
fuelectenerg-402	40	16	r2	r2	PROPN
fuelectenerg-402	40	17	,	,	PUNCT
fuelectenerg-402	40	18	r3	r3	PROPN
fuelectenerg-402	40	19	,	,	PUNCT
fuelectenerg-402	40	20	and	and	CCONJ
fuelectenerg-402	40	21	r4	r4	NOUN
fuelectenerg-402	40	22	are	be	AUX
fuelectenerg-402	40	23	approximately	approximately	ADV
fuelectenerg-402	40	24	equal	equal	ADJ
fuelectenerg-402	40	25	in	in	ADP
fuelectenerg-402	40	26	the	the	DET
fuelectenerg-402	40	27	absence	absence	NOUN
fuelectenerg-402	40	28	of	of	ADP
fuelectenerg-402	40	29	the	the	DET
fuelectenerg-402	40	30	applied	apply	VERB
fuelectenerg-402	40	31	pressure	pressure	NOUN
fuelectenerg-402	40	32	.	.	PUNCT
fuelectenerg-402	41	1	their	their	PRON
fuelectenerg-402	41	2	value	value	NOUN
fuelectenerg-402	41	3	is	be	AUX
fuelectenerg-402	41	4	within	within	ADP
fuelectenerg-402	41	5	the	the	DET
fuelectenerg-402	41	6	range	range	NOUN
fuelectenerg-402	41	7	from	from	ADP
fuelectenerg-402	41	8	2	2	NUM
fuelectenerg-402	41	9	kω	kω	NOUN
fuelectenerg-402	41	10	to	to	ADP
fuelectenerg-402	41	11	3	3	NUM
fuelectenerg-402	41	12	kω	kω	NOUN
fuelectenerg-402	41	13	,	,	PUNCT
fuelectenerg-402	41	14	and	and	CCONJ
fuelectenerg-402	41	15	the	the	DET
fuelectenerg-402	41	16	temperature	temperature	NOUN
fuelectenerg-402	41	17	coefficient	coefficient	NOUN
fuelectenerg-402	41	18	of	of	ADP
fuelectenerg-402	41	19	the	the	DET
fuelectenerg-402	41	20	resistance	resistance	NOUN
fuelectenerg-402	41	21	is	be	AUX
fuelectenerg-402	41	22	in	in	ADP
fuelectenerg-402	41	23	the	the	DET
fuelectenerg-402	41	24	range	range	NOUN
fuelectenerg-402	41	25	from	from	ADP
fuelectenerg-402	41	26	0.13	0.13	NUM
fuelectenerg-402	41	27	%	%	NOUN
fuelectenerg-402	41	28	/	/	SYM
fuelectenerg-402	42	1	°	°	ADP
fuelectenerg-402	42	2	c	c	NOUN
fuelectenerg-402	42	3	to	to	ADP
fuelectenerg-402	42	4	0.15	0.15	NUM
fuelectenerg-402	42	5	%	%	NOUN
fuelectenerg-402	42	6	/	/	SYM
fuelectenerg-402	42	7	°	°	ADP
fuelectenerg-402	42	8	c	c	NOUN
fuelectenerg-402	42	9	.	.	PUNCT
fuelectenerg-402	43	1	fig	fig	NOUN
fuelectenerg-402	43	2	.	.	PUNCT
fuelectenerg-402	44	1	2	2	NUM
fuelectenerg-402	44	2	simplified	simplify	VERB
fuelectenerg-402	44	3	electrical	electrical	ADJ
fuelectenerg-402	44	4	circuit	circuit	NOUN
fuelectenerg-402	44	5	diagram	diagram	NOUN
fuelectenerg-402	44	6	of	of	ADP
fuelectenerg-402	44	7	a	a	DET
fuelectenerg-402	44	8	piezoresistive	piezoresistive	ADJ
fuelectenerg-402	44	9	pressure	pressure	NOUN
fuelectenerg-402	44	10	sensor	sensor	NOUN
fuelectenerg-402	44	11	with	with	ADP
fuelectenerg-402	44	12	current	current	ADJ
fuelectenerg-402	44	13	excitation	excitation	NOUN
fuelectenerg-402	44	14	126	126	NUM
fuelectenerg-402	44	15	m.	m.	NOUN
fuelectenerg-402	44	16	frantlović	frantlović	NOUN
fuelectenerg-402	44	17	,	,	PUNCT
fuelectenerg-402	44	18	i.	i.	PROPN
fuelectenerg-402	44	19	jokić	jokić	PROPN
fuelectenerg-402	44	20	,	,	PUNCT
fuelectenerg-402	44	21	ž	ž	PROPN
fuelectenerg-402	44	22	.	.	PUNCT
fuelectenerg-402	44	23	lazić	lazić	PROPN
fuelectenerg-402	44	24	,	,	PUNCT
fuelectenerg-402	44	25	et	et	PROPN
fuelectenerg-402	44	26	al	al	PROPN
fuelectenerg-402	44	27	.	.	PROPN
fuelectenerg-402	45	1	2	2	NUM
fuelectenerg-402	45	2	.	.	X
fuelectenerg-402	45	3	method	method	PROPN
fuelectenerg-402	45	4	2.1	2.1	NUM
fuelectenerg-402	45	5	.	.	PUNCT
fuelectenerg-402	46	1	sensor	sensor	NOUN
fuelectenerg-402	46	2	characterization	characterization	NOUN
fuelectenerg-402	46	3	in	in	ADP
fuelectenerg-402	46	4	order	order	NOUN
fuelectenerg-402	46	5	to	to	PART
fuelectenerg-402	46	6	devise	devise	VERB
fuelectenerg-402	46	7	a	a	DET
fuelectenerg-402	46	8	temperature	temperature	NOUN
fuelectenerg-402	46	9	measurement	measurement	NOUN
fuelectenerg-402	46	10	method	method	NOUN
fuelectenerg-402	46	11	based	base	VERB
fuelectenerg-402	46	12	on	on	ADP
fuelectenerg-402	46	13	the	the	DET
fuelectenerg-402	46	14	resistance	resistance	NOUN
fuelectenerg-402	46	15	of	of	ADP
fuelectenerg-402	46	16	the	the	DET
fuelectenerg-402	46	17	sensor	sensor	NOUN
fuelectenerg-402	46	18	's	's	PART
fuelectenerg-402	46	19	wheatstone	wheatstone	PROPN
fuelectenerg-402	46	20	bridge	bridge	NOUN
fuelectenerg-402	46	21	,	,	PUNCT
fuelectenerg-402	46	22	three	three	NUM
fuelectenerg-402	46	23	gauge	gauge	NOUN
fuelectenerg-402	46	24	pressure	pressure	NOUN
fuelectenerg-402	46	25	sensors	sensor	NOUN
fuelectenerg-402	46	26	based	base	VERB
fuelectenerg-402	46	27	on	on	ADP
fuelectenerg-402	46	28	the	the	DET
fuelectenerg-402	46	29	sp-9	sp-9	VERB
fuelectenerg-402	46	30	sensing	sense	VERB
fuelectenerg-402	46	31	element	element	NOUN
fuelectenerg-402	46	32	are	be	AUX
fuelectenerg-402	46	33	characterized	characterize	VERB
fuelectenerg-402	46	34	in	in	ADP
fuelectenerg-402	46	35	terms	term	NOUN
fuelectenerg-402	46	36	of	of	ADP
fuelectenerg-402	46	37	their	their	PRON
fuelectenerg-402	46	38	temperature	temperature	NOUN
fuelectenerg-402	46	39	response	response	NOUN
fuelectenerg-402	46	40	.	.	PUNCT
fuelectenerg-402	47	1	the	the	DET
fuelectenerg-402	47	2	mechanical	mechanical	ADJ
fuelectenerg-402	47	3	construction	construction	NOUN
fuelectenerg-402	47	4	of	of	ADP
fuelectenerg-402	47	5	all	all	DET
fuelectenerg-402	47	6	the	the	DET
fuelectenerg-402	47	7	sensors	sensor	NOUN
fuelectenerg-402	47	8	is	be	AUX
fuelectenerg-402	47	9	the	the	DET
fuelectenerg-402	47	10	same	same	ADJ
fuelectenerg-402	47	11	,	,	PUNCT
fuelectenerg-402	47	12	featuring	feature	VERB
fuelectenerg-402	47	13	a	a	DET
fuelectenerg-402	47	14	separation	separation	NOUN
fuelectenerg-402	47	15	membrane	membrane	NOUN
fuelectenerg-402	47	16	and	and	CCONJ
fuelectenerg-402	47	17	silicone	silicone	NOUN
fuelectenerg-402	47	18	oil	oil	NOUN
fuelectenerg-402	47	19	filling	filling	NOUN
fuelectenerg-402	47	20	.	.	PUNCT
fuelectenerg-402	48	1	the	the	DET
fuelectenerg-402	48	2	experimental	experimental	ADJ
fuelectenerg-402	48	3	setup	setup	NOUN
fuelectenerg-402	48	4	used	use	VERB
fuelectenerg-402	48	5	for	for	ADP
fuelectenerg-402	48	6	the	the	DET
fuelectenerg-402	48	7	characterization	characterization	NOUN
fuelectenerg-402	48	8	of	of	ADP
fuelectenerg-402	48	9	the	the	DET
fuelectenerg-402	48	10	sensors	sensor	NOUN
fuelectenerg-402	48	11	was	be	AUX
fuelectenerg-402	48	12	similar	similar	ADJ
fuelectenerg-402	48	13	to	to	ADP
fuelectenerg-402	48	14	the	the	DET
fuelectenerg-402	48	15	one	one	NOUN
fuelectenerg-402	48	16	described	describe	VERB
fuelectenerg-402	48	17	in	in	ADP
fuelectenerg-402	48	18	our	our	PRON
fuelectenerg-402	48	19	previous	previous	ADJ
fuelectenerg-402	48	20	work	work	NOUN
fuelectenerg-402	48	21	[	[	X
fuelectenerg-402	48	22	11	11	NUM
fuelectenerg-402	48	23	]	]	PUNCT
fuelectenerg-402	48	24	,	,	PUNCT
fuelectenerg-402	48	25	except	except	SCONJ
fuelectenerg-402	48	26	for	for	ADP
fuelectenerg-402	48	27	the	the	DET
fuelectenerg-402	48	28	relative	relative	ADJ
fuelectenerg-402	48	29	pressure	pressure	NOUN
fuelectenerg-402	48	30	that	that	PRON
fuelectenerg-402	48	31	was	be	AUX
fuelectenerg-402	48	32	set	set	VERB
fuelectenerg-402	48	33	to	to	ADP
fuelectenerg-402	48	34	zero	zero	NUM
fuelectenerg-402	48	35	by	by	ADP
fuelectenerg-402	48	36	leaving	leave	VERB
fuelectenerg-402	48	37	the	the	DET
fuelectenerg-402	48	38	sensors	sensor	NOUN
fuelectenerg-402	48	39	'	'	PART
fuelectenerg-402	48	40	pressure	pressure	NOUN
fuelectenerg-402	48	41	ports	port	NOUN
fuelectenerg-402	48	42	at	at	ADP
fuelectenerg-402	48	43	the	the	DET
fuelectenerg-402	48	44	normal	normal	ADJ
fuelectenerg-402	48	45	atmospheric	atmospheric	ADJ
fuelectenerg-402	48	46	pressure	pressure	NOUN
fuelectenerg-402	48	47	throughout	throughout	ADP
fuelectenerg-402	48	48	the	the	DET
fuelectenerg-402	48	49	experiment	experiment	NOUN
fuelectenerg-402	48	50	.	.	PUNCT
fuelectenerg-402	49	1	acquisition	acquisition	NOUN
fuelectenerg-402	49	2	of	of	ADP
fuelectenerg-402	49	3	the	the	DET
fuelectenerg-402	49	4	signals	signal	NOUN
fuelectenerg-402	49	5	from	from	ADP
fuelectenerg-402	49	6	the	the	DET
fuelectenerg-402	49	7	pressure	pressure	NOUN
fuelectenerg-402	49	8	sensors	sensor	NOUN
fuelectenerg-402	49	9	was	be	AUX
fuelectenerg-402	49	10	performed	perform	VERB
fuelectenerg-402	49	11	using	use	VERB
fuelectenerg-402	49	12	a	a	DET
fuelectenerg-402	49	13	custom	custom	NOUN
fuelectenerg-402	49	14	designed	design	VERB
fuelectenerg-402	49	15	signal	signal	NOUN
fuelectenerg-402	49	16	acquisition	acquisition	NOUN
fuelectenerg-402	49	17	unit	unit	NOUN
fuelectenerg-402	49	18	connected	connect	VERB
fuelectenerg-402	49	19	to	to	ADP
fuelectenerg-402	49	20	a	a	DET
fuelectenerg-402	49	21	personal	personal	ADJ
fuelectenerg-402	49	22	computer	computer	NOUN
fuelectenerg-402	49	23	.	.	PUNCT
fuelectenerg-402	50	1	a	a	DET
fuelectenerg-402	50	2	simplified	simplified	ADJ
fuelectenerg-402	50	3	block	block	NOUN
fuelectenerg-402	50	4	diagram	diagram	NOUN
fuelectenerg-402	50	5	of	of	ADP
fuelectenerg-402	50	6	the	the	DET
fuelectenerg-402	50	7	unit	unit	NOUN
fuelectenerg-402	50	8	is	be	AUX
fuelectenerg-402	50	9	shown	show	VERB
fuelectenerg-402	50	10	in	in	ADP
fuelectenerg-402	50	11	fig	fig	NOUN
fuelectenerg-402	50	12	.	.	PUNCT
fuelectenerg-402	51	1	3	3	X
fuelectenerg-402	51	2	.	.	X
fuelectenerg-402	51	3	fig	fig	NOUN
fuelectenerg-402	51	4	.	.	PUNCT
fuelectenerg-402	52	1	3	3	NUM
fuelectenerg-402	52	2	simplified	simplify	VERB
fuelectenerg-402	52	3	block	block	NOUN
fuelectenerg-402	52	4	diagram	diagram	NOUN
fuelectenerg-402	52	5	of	of	ADP
fuelectenerg-402	52	6	the	the	DET
fuelectenerg-402	52	7	signal	signal	PROPN
fuelectenerg-402	52	8	acquisition	acquisition	NOUN
fuelectenerg-402	52	9	unit	unit	NOUN
fuelectenerg-402	52	10	the	the	DET
fuelectenerg-402	52	11	input	input	NOUN
fuelectenerg-402	52	12	circuitry	circuitry	NOUN
fuelectenerg-402	52	13	connected	connect	VERB
fuelectenerg-402	52	14	to	to	ADP
fuelectenerg-402	52	15	the	the	DET
fuelectenerg-402	52	16	sensor	sensor	NOUN
fuelectenerg-402	52	17	under	under	ADP
fuelectenerg-402	52	18	test	test	NOUN
fuelectenerg-402	52	19	consists	consist	VERB
fuelectenerg-402	52	20	of	of	ADP
fuelectenerg-402	52	21	a	a	DET
fuelectenerg-402	52	22	constant	constant	ADJ
fuelectenerg-402	52	23	current	current	ADJ
fuelectenerg-402	52	24	source	source	NOUN
fuelectenerg-402	52	25	for	for	ADP
fuelectenerg-402	52	26	sensor	sensor	NOUN
fuelectenerg-402	52	27	excitation	excitation	NOUN
fuelectenerg-402	52	28	(	(	PUNCT
fuelectenerg-402	52	29	i0=420	i0=420	NOUN
fuelectenerg-402	52	30	μa	μa	NOUN
fuelectenerg-402	52	31	)	)	PUNCT
fuelectenerg-402	52	32	,	,	PUNCT
fuelectenerg-402	52	33	two	two	NUM
fuelectenerg-402	52	34	24	24	NUM
fuelectenerg-402	52	35	-	-	PUNCT
fuelectenerg-402	52	36	bit	bit	NOUN
fuelectenerg-402	52	37	delta	delta	NOUN
fuelectenerg-402	52	38	-	-	PUNCT
fuelectenerg-402	52	39	sigma	sigma	PROPN
fuelectenerg-402	52	40	analog	analog	NOUN
fuelectenerg-402	52	41	-	-	PUNCT
fuelectenerg-402	52	42	to	to	ADP
fuelectenerg-402	52	43	-	-	PUNCT
fuelectenerg-402	52	44	digital	digital	ADJ
fuelectenerg-402	52	45	converters	converter	NOUN
fuelectenerg-402	52	46	(	(	PUNCT
fuelectenerg-402	52	47	adc	adc	PROPN
fuelectenerg-402	52	48	)	)	PUNCT
fuelectenerg-402	52	49	,	,	PUNCT
fuelectenerg-402	52	50	two	two	NUM
fuelectenerg-402	52	51	zero	zero	NUM
fuelectenerg-402	52	52	-	-	PUNCT
fuelectenerg-402	52	53	drift	drift	NOUN
fuelectenerg-402	52	54	programmable	programmable	ADJ
fuelectenerg-402	52	55	gain	gain	NOUN
fuelectenerg-402	52	56	instrumentation	instrumentation	NOUN
fuelectenerg-402	52	57	amplifiers	amplifier	NOUN
fuelectenerg-402	52	58	(	(	PUNCT
fuelectenerg-402	52	59	pga	pga	PROPN
fuelectenerg-402	52	60	)	)	PUNCT
fuelectenerg-402	52	61	,	,	PUNCT
fuelectenerg-402	52	62	one	one	NUM
fuelectenerg-402	52	63	zero	zero	NUM
fuelectenerg-402	52	64	-	-	PUNCT
fuelectenerg-402	52	65	drift	drift	NOUN
fuelectenerg-402	52	66	buffer	buffer	NOUN
fuelectenerg-402	52	67	amplifier	amplifier	NOUN
fuelectenerg-402	52	68	and	and	CCONJ
fuelectenerg-402	52	69	one	one	NUM
fuelectenerg-402	52	70	high	high	ADJ
fuelectenerg-402	52	71	-	-	PUNCT
fuelectenerg-402	52	72	performance	performance	NOUN
fuelectenerg-402	52	73	resistor	resistor	NOUN
fuelectenerg-402	52	74	(	(	PUNCT
fuelectenerg-402	52	75	rref=5	rref=5	NOUN
fuelectenerg-402	52	76	kω	kω	NOUN
fuelectenerg-402	52	77	with	with	ADP
fuelectenerg-402	52	78	±0.01	±0.01	PROPN
fuelectenerg-402	52	79	%	%	NOUN
fuelectenerg-402	52	80	tolerance	tolerance	NOUN
fuelectenerg-402	52	81	,	,	PUNCT
fuelectenerg-402	52	82	temperature	temperature	NOUN
fuelectenerg-402	52	83	coefficient	coefficient	NOUN
fuelectenerg-402	52	84	of	of	ADP
fuelectenerg-402	52	85	resistance	resistance	NOUN
fuelectenerg-402	52	86	≤	≤	ADV
fuelectenerg-402	52	87	2	2	NUM
fuelectenerg-402	52	88	ppm/	ppm/	NOUN
fuelectenerg-402	52	89	°	°	NOUN
fuelectenerg-402	52	90	c	c	NOUN
fuelectenerg-402	52	91	)	)	PUNCT
fuelectenerg-402	52	92	.	.	PUNCT
fuelectenerg-402	53	1	the	the	DET
fuelectenerg-402	53	2	amplifiers	amplifier	NOUN
fuelectenerg-402	53	3	are	be	AUX
fuelectenerg-402	53	4	necessary	necessary	ADJ
fuelectenerg-402	53	5	when	when	SCONJ
fuelectenerg-402	53	6	low	low	ADJ
fuelectenerg-402	53	7	level	level	NOUN
fuelectenerg-402	53	8	signals	signal	NOUN
fuelectenerg-402	53	9	are	be	AUX
fuelectenerg-402	53	10	measured	measure	VERB
fuelectenerg-402	53	11	and	and	CCONJ
fuelectenerg-402	53	12	also	also	ADV
fuelectenerg-402	53	13	because	because	SCONJ
fuelectenerg-402	53	14	of	of	ADP
fuelectenerg-402	53	15	the	the	DET
fuelectenerg-402	53	16	high	high	ADJ
fuelectenerg-402	53	17	impedance	impedance	NOUN
fuelectenerg-402	53	18	of	of	ADP
fuelectenerg-402	53	19	the	the	DET
fuelectenerg-402	53	20	sensor	sensor	NOUN
fuelectenerg-402	53	21	used	use	VERB
fuelectenerg-402	53	22	as	as	ADP
fuelectenerg-402	53	23	the	the	DET
fuelectenerg-402	53	24	signal	signal	ADJ
fuelectenerg-402	53	25	source	source	NOUN
fuelectenerg-402	53	26	.	.	PUNCT
fuelectenerg-402	54	1	measurements	measurement	NOUN
fuelectenerg-402	54	2	are	be	AUX
fuelectenerg-402	54	3	ratiometric	ratiometric	ADJ
fuelectenerg-402	54	4	,	,	PUNCT
fuelectenerg-402	54	5	with	with	ADP
fuelectenerg-402	54	6	the	the	DET
fuelectenerg-402	54	7	adc	adc	PROPN
fuelectenerg-402	54	8	reference	reference	NOUN
fuelectenerg-402	54	9	voltage	voltage	NOUN
fuelectenerg-402	54	10	proportional	proportional	NOUN
fuelectenerg-402	54	11	to	to	ADP
fuelectenerg-402	54	12	the	the	DET
fuelectenerg-402	54	13	sensor	sensor	NOUN
fuelectenerg-402	54	14	excitation	excitation	NOUN
fuelectenerg-402	54	15	current	current	NOUN
fuelectenerg-402	54	16	(	(	PUNCT
fuelectenerg-402	54	17	vref	vref	NOUN
fuelectenerg-402	54	18	=	=	SYM
fuelectenerg-402	54	19	i0·rref	i0·rref	NOUN
fuelectenerg-402	54	20	)	)	PUNCT
fuelectenerg-402	54	21	,	,	PUNCT
fuelectenerg-402	54	22	in	in	ADP
fuelectenerg-402	54	23	order	order	NOUN
fuelectenerg-402	54	24	to	to	PART
fuelectenerg-402	54	25	eliminate	eliminate	VERB
fuelectenerg-402	54	26	the	the	DET
fuelectenerg-402	54	27	error	error	NOUN
fuelectenerg-402	54	28	introduced	introduce	VERB
fuelectenerg-402	54	29	by	by	ADP
fuelectenerg-402	54	30	variations	variation	NOUN
fuelectenerg-402	54	31	of	of	ADP
fuelectenerg-402	54	32	the	the	DET
fuelectenerg-402	54	33	excitation	excitation	NOUN
fuelectenerg-402	54	34	current	current	NOUN
fuelectenerg-402	54	35	.	.	PUNCT
fuelectenerg-402	55	1	the	the	DET
fuelectenerg-402	55	2	resistance	resistance	NOUN
fuelectenerg-402	55	3	of	of	ADP
fuelectenerg-402	55	4	the	the	DET
fuelectenerg-402	55	5	sensor	sensor	NOUN
fuelectenerg-402	55	6	,	,	PUNCT
fuelectenerg-402	55	7	seen	see	VERB
fuelectenerg-402	55	8	at	at	ADP
fuelectenerg-402	55	9	its	its	PRON
fuelectenerg-402	55	10	excitation	excitation	NOUN
fuelectenerg-402	55	11	port	port	NOUN
fuelectenerg-402	55	12	,	,	PUNCT
fuelectenerg-402	55	13	is	be	AUX
fuelectenerg-402	55	14	calculated	calculate	VERB
fuelectenerg-402	55	15	as	as	ADP
fuelectenerg-402	55	16	rbr=(rref/(a·2	rbr=(rref/(a·2	NOUN
fuelectenerg-402	55	17	n-1	n-1	NUM
fuelectenerg-402	55	18	)	)	PUNCT
fuelectenerg-402	55	19	)	)	PUNCT
fuelectenerg-402	55	20	·	·	PUNCT
fuelectenerg-402	55	21	n	n	CCONJ
fuelectenerg-402	55	22	,	,	PUNCT
fuelectenerg-402	55	23	where	where	SCONJ
fuelectenerg-402	55	24	a	a	PRON
fuelectenerg-402	55	25	is	be	AUX
fuelectenerg-402	55	26	the	the	DET
fuelectenerg-402	55	27	amplifier	amplifier	ADJ
fuelectenerg-402	55	28	gain	gain	NOUN
fuelectenerg-402	55	29	,	,	PUNCT
fuelectenerg-402	55	30	n	n	X
fuelectenerg-402	55	31	is	be	AUX
fuelectenerg-402	55	32	the	the	DET
fuelectenerg-402	55	33	resolution	resolution	NOUN
fuelectenerg-402	55	34	of	of	ADP
fuelectenerg-402	55	35	the	the	DET
fuelectenerg-402	55	36	adc	adc	PROPN
fuelectenerg-402	55	37	,	,	PUNCT
fuelectenerg-402	55	38	and	and	CCONJ
fuelectenerg-402	55	39	n	n	PRON
fuelectenerg-402	55	40	is	be	AUX
fuelectenerg-402	55	41	the	the	DET
fuelectenerg-402	55	42	numeric	numeric	ADJ
fuelectenerg-402	55	43	value	value	NOUN
fuelectenerg-402	55	44	at	at	ADP
fuelectenerg-402	55	45	the	the	DET
fuelectenerg-402	55	46	adc	adc	PROPN
fuelectenerg-402	55	47	's	's	PART
fuelectenerg-402	55	48	output	output	NOUN
fuelectenerg-402	55	49	(	(	PUNCT
fuelectenerg-402	55	50	in	in	ADP
fuelectenerg-402	55	51	this	this	DET
fuelectenerg-402	55	52	case	case	NOUN
fuelectenerg-402	55	53	a=1	a=1	PUNCT
fuelectenerg-402	55	54	and	and	CCONJ
fuelectenerg-402	55	55	n=24	n=24	PROPN
fuelectenerg-402	55	56	)	)	PUNCT
fuelectenerg-402	55	57	.	.	PUNCT
fuelectenerg-402	56	1	in	in	ADP
fuelectenerg-402	56	2	this	this	DET
fuelectenerg-402	56	3	experiment	experiment	NOUN
fuelectenerg-402	56	4	the	the	DET
fuelectenerg-402	56	5	voltage	voltage	NOUN
fuelectenerg-402	56	6	between	between	ADP
fuelectenerg-402	56	7	the	the	DET
fuelectenerg-402	56	8	remaining	remain	VERB
fuelectenerg-402	56	9	ends	end	NOUN
fuelectenerg-402	56	10	of	of	ADP
fuelectenerg-402	56	11	the	the	DET
fuelectenerg-402	56	12	wheatstone	wheatstone	PROPN
fuelectenerg-402	56	13	temperature	temperature	NOUN
fuelectenerg-402	56	14	measurement	measurement	NOUN
fuelectenerg-402	56	15	performance	performance	NOUN
fuelectenerg-402	56	16	of	of	ADP
fuelectenerg-402	56	17	silicon	silicon	NOUN
fuelectenerg-402	56	18	piezoresistive	piezoresistive	ADJ
fuelectenerg-402	56	19	mems	mem	NOUN
fuelectenerg-402	56	20	pressure	pressure	NOUN
fuelectenerg-402	56	21	sensors	sensor	NOUN
fuelectenerg-402	56	22	...	...	PUNCT
fuelectenerg-402	57	1	127	127	NUM
fuelectenerg-402	57	2	bridge	bridge	NOUN
fuelectenerg-402	57	3	was	be	AUX
fuelectenerg-402	57	4	not	not	PART
fuelectenerg-402	57	5	measured	measure	VERB
fuelectenerg-402	57	6	.	.	PUNCT
fuelectenerg-402	58	1	for	for	ADP
fuelectenerg-402	58	2	the	the	DET
fuelectenerg-402	58	3	reference	reference	NOUN
fuelectenerg-402	58	4	measurement	measurement	NOUN
fuelectenerg-402	58	5	of	of	ADP
fuelectenerg-402	58	6	the	the	DET
fuelectenerg-402	58	7	pressure	pressure	NOUN
fuelectenerg-402	58	8	sensor	sensor	NOUN
fuelectenerg-402	58	9	's	's	PART
fuelectenerg-402	58	10	temperature	temperature	NOUN
fuelectenerg-402	58	11	a	a	DET
fuelectenerg-402	58	12	high	high	ADJ
fuelectenerg-402	58	13	performance	performance	NOUN
fuelectenerg-402	58	14	pt-100	pt-100	PRON
fuelectenerg-402	58	15	sensor	sensor	NOUN
fuelectenerg-402	58	16	was	be	AUX
fuelectenerg-402	58	17	used	use	VERB
fuelectenerg-402	58	18	.	.	PUNCT
fuelectenerg-402	59	1	the	the	DET
fuelectenerg-402	59	2	temperature	temperature	NOUN
fuelectenerg-402	59	3	measurement	measurement	NOUN
fuelectenerg-402	59	4	block	block	NOUN
fuelectenerg-402	59	5	shown	show	VERB
fuelectenerg-402	59	6	in	in	ADP
fuelectenerg-402	59	7	the	the	DET
fuelectenerg-402	59	8	diagram	diagram	NOUN
fuelectenerg-402	59	9	is	be	AUX
fuelectenerg-402	59	10	realized	realize	VERB
fuelectenerg-402	59	11	using	use	VERB
fuelectenerg-402	59	12	the	the	DET
fuelectenerg-402	59	13	same	same	ADJ
fuelectenerg-402	59	14	circuitry	circuitry	NOUN
fuelectenerg-402	59	15	as	as	ADP
fuelectenerg-402	59	16	the	the	DET
fuelectenerg-402	59	17	one	one	NOUN
fuelectenerg-402	59	18	used	use	VERB
fuelectenerg-402	59	19	for	for	ADP
fuelectenerg-402	59	20	the	the	DET
fuelectenerg-402	59	21	pressure	pressure	NOUN
fuelectenerg-402	59	22	sensor	sensor	NOUN
fuelectenerg-402	59	23	,	,	PUNCT
fuelectenerg-402	59	24	thus	thus	ADV
fuelectenerg-402	59	25	enabling	enable	VERB
fuelectenerg-402	59	26	the	the	DET
fuelectenerg-402	59	27	inputs	input	NOUN
fuelectenerg-402	59	28	of	of	ADP
fuelectenerg-402	59	29	the	the	DET
fuelectenerg-402	59	30	signal	signal	PROPN
fuelectenerg-402	59	31	acquisition	acquisition	NOUN
fuelectenerg-402	59	32	unit	unit	NOUN
fuelectenerg-402	59	33	to	to	PART
fuelectenerg-402	59	34	be	be	AUX
fuelectenerg-402	59	35	interchangeable	interchangeable	ADJ
fuelectenerg-402	59	36	.	.	PUNCT
fuelectenerg-402	60	1	the	the	DET
fuelectenerg-402	60	2	control	control	PROPN
fuelectenerg-402	60	3	&	&	CCONJ
fuelectenerg-402	60	4	data	data	PROPN
fuelectenerg-402	60	5	acquisition	acquisition	NOUN
fuelectenerg-402	60	6	block	block	NOUN
fuelectenerg-402	60	7	is	be	AUX
fuelectenerg-402	60	8	based	base	VERB
fuelectenerg-402	60	9	on	on	ADP
fuelectenerg-402	60	10	a	a	DET
fuelectenerg-402	60	11	msp430f169	msp430f169	NOUN
fuelectenerg-402	60	12	microcontroller	microcontroller	NOUN
fuelectenerg-402	60	13	.	.	PUNCT
fuelectenerg-402	61	1	it	it	PRON
fuelectenerg-402	61	2	controls	control	VERB
fuelectenerg-402	61	3	all	all	DET
fuelectenerg-402	61	4	the	the	DET
fuelectenerg-402	61	5	unit	unit	NOUN
fuelectenerg-402	61	6	's	's	PART
fuelectenerg-402	61	7	functions	function	NOUN
fuelectenerg-402	61	8	,	,	PUNCT
fuelectenerg-402	61	9	including	include	VERB
fuelectenerg-402	61	10	the	the	DET
fuelectenerg-402	61	11	communication	communication	NOUN
fuelectenerg-402	61	12	with	with	ADP
fuelectenerg-402	61	13	the	the	DET
fuelectenerg-402	61	14	pc	pc	NOUN
fuelectenerg-402	61	15	computer	computer	NOUN
fuelectenerg-402	61	16	via	via	ADP
fuelectenerg-402	61	17	the	the	DET
fuelectenerg-402	61	18	rs-232	rs-232	PROPN
fuelectenerg-402	61	19	interface	interface	NOUN
fuelectenerg-402	61	20	(	(	PUNCT
fuelectenerg-402	61	21	the	the	DET
fuelectenerg-402	61	22	comm	comm	NOUN
fuelectenerg-402	61	23	.	.	PUNCT
fuelectenerg-402	62	1	interface	interface	NOUN
fuelectenerg-402	62	2	block	block	NOUN
fuelectenerg-402	62	3	)	)	PUNCT
fuelectenerg-402	62	4	.	.	PUNCT
fuelectenerg-402	63	1	the	the	DET
fuelectenerg-402	63	2	power	power	NOUN
fuelectenerg-402	63	3	supply	supply	NOUN
fuelectenerg-402	63	4	block	block	NOUN
fuelectenerg-402	63	5	contains	contain	VERB
fuelectenerg-402	63	6	low	low	ADJ
fuelectenerg-402	63	7	-	-	PUNCT
fuelectenerg-402	63	8	noise	noise	NOUN
fuelectenerg-402	63	9	voltage	voltage	NOUN
fuelectenerg-402	63	10	regulators	regulator	NOUN
fuelectenerg-402	63	11	.	.	PUNCT
fuelectenerg-402	64	1	the	the	DET
fuelectenerg-402	64	2	power	power	NOUN
fuelectenerg-402	64	3	consumption	consumption	NOUN
fuelectenerg-402	64	4	of	of	ADP
fuelectenerg-402	64	5	the	the	DET
fuelectenerg-402	64	6	signal	signal	PROPN
fuelectenerg-402	64	7	acquisition	acquisition	NOUN
fuelectenerg-402	64	8	unit	unit	NOUN
fuelectenerg-402	64	9	is	be	AUX
fuelectenerg-402	64	10	low	low	ADJ
fuelectenerg-402	64	11	,	,	PUNCT
fuelectenerg-402	64	12	so	so	SCONJ
fuelectenerg-402	64	13	it	it	PRON
fuelectenerg-402	64	14	is	be	AUX
fuelectenerg-402	64	15	powered	power	VERB
fuelectenerg-402	64	16	by	by	ADP
fuelectenerg-402	64	17	4	4	NUM
fuelectenerg-402	64	18	aaa	aaa	NOUN
fuelectenerg-402	64	19	batteries	battery	NOUN
fuelectenerg-402	64	20	.	.	PUNCT
fuelectenerg-402	65	1	the	the	DET
fuelectenerg-402	65	2	temperature	temperature	NOUN
fuelectenerg-402	65	3	of	of	ADP
fuelectenerg-402	65	4	the	the	DET
fuelectenerg-402	65	5	sensor	sensor	NOUN
fuelectenerg-402	65	6	under	under	ADP
fuelectenerg-402	65	7	test	test	NOUN
fuelectenerg-402	65	8	is	be	AUX
fuelectenerg-402	65	9	controlled	control	VERB
fuelectenerg-402	65	10	using	use	VERB
fuelectenerg-402	65	11	a	a	DET
fuelectenerg-402	65	12	climatic	climatic	ADJ
fuelectenerg-402	65	13	test	test	NOUN
fuelectenerg-402	65	14	chamber	chamber	NOUN
fuelectenerg-402	65	15	,	,	PUNCT
fuelectenerg-402	65	16	in	in	ADP
fuelectenerg-402	65	17	the	the	DET
fuelectenerg-402	65	18	range	range	NOUN
fuelectenerg-402	65	19	from	from	ADP
fuelectenerg-402	65	20	-20	-20	PROPN
fuelectenerg-402	65	21	°	°	PROPN
fuelectenerg-402	65	22	c	c	NOUN
fuelectenerg-402	65	23	to	to	ADP
fuelectenerg-402	65	24	70	70	NUM
fuelectenerg-402	65	25	°	°	NOUN
fuelectenerg-402	65	26	c	c	NOUN
fuelectenerg-402	65	27	.	.	PUNCT
fuelectenerg-402	66	1	during	during	ADP
fuelectenerg-402	66	2	the	the	DET
fuelectenerg-402	66	3	sensor	sensor	NOUN
fuelectenerg-402	66	4	characterization	characterization	NOUN
fuelectenerg-402	66	5	experiment	experiment	NOUN
fuelectenerg-402	66	6	the	the	DET
fuelectenerg-402	66	7	operator	operator	NOUN
fuelectenerg-402	66	8	sets	set	VERB
fuelectenerg-402	66	9	the	the	DET
fuelectenerg-402	66	10	temperature	temperature	NOUN
fuelectenerg-402	66	11	value	value	NOUN
fuelectenerg-402	66	12	,	,	PUNCT
fuelectenerg-402	66	13	waits	wait	VERB
fuelectenerg-402	66	14	for	for	SCONJ
fuelectenerg-402	66	15	the	the	DET
fuelectenerg-402	66	16	sensor	sensor	NOUN
fuelectenerg-402	66	17	temperature	temperature	NOUN
fuelectenerg-402	66	18	to	to	PART
fuelectenerg-402	66	19	settle	settle	VERB
fuelectenerg-402	66	20	and	and	CCONJ
fuelectenerg-402	66	21	then	then	ADV
fuelectenerg-402	66	22	initiates	initiate	VERB
fuelectenerg-402	66	23	the	the	DET
fuelectenerg-402	66	24	measurement	measurement	NOUN
fuelectenerg-402	66	25	.	.	PUNCT
fuelectenerg-402	67	1	the	the	DET
fuelectenerg-402	67	2	process	process	NOUN
fuelectenerg-402	67	3	is	be	AUX
fuelectenerg-402	67	4	repeated	repeat	VERB
fuelectenerg-402	67	5	for	for	ADP
fuelectenerg-402	67	6	each	each	DET
fuelectenerg-402	67	7	temperature	temperature	NOUN
fuelectenerg-402	67	8	value	value	NOUN
fuelectenerg-402	67	9	in	in	ADP
fuelectenerg-402	67	10	a	a	DET
fuelectenerg-402	67	11	sequence	sequence	NOUN
fuelectenerg-402	67	12	.	.	PUNCT
fuelectenerg-402	68	1	the	the	DET
fuelectenerg-402	68	2	personal	personal	ADJ
fuelectenerg-402	68	3	computer	computer	NOUN
fuelectenerg-402	68	4	receives	receive	VERB
fuelectenerg-402	68	5	the	the	DET
fuelectenerg-402	68	6	measurement	measurement	NOUN
fuelectenerg-402	68	7	data	datum	NOUN
fuelectenerg-402	68	8	from	from	ADP
fuelectenerg-402	68	9	the	the	DET
fuelectenerg-402	68	10	signal	signal	NOUN
fuelectenerg-402	68	11	acquisition	acquisition	NOUN
fuelectenerg-402	68	12	unit	unit	NOUN
fuelectenerg-402	68	13	,	,	PUNCT
fuelectenerg-402	68	14	displays	display	VERB
fuelectenerg-402	68	15	the	the	DET
fuelectenerg-402	68	16	measurement	measurement	NOUN
fuelectenerg-402	68	17	indications	indication	NOUN
fuelectenerg-402	68	18	and	and	CCONJ
fuelectenerg-402	68	19	saves	save	VERB
fuelectenerg-402	68	20	the	the	DET
fuelectenerg-402	68	21	data	datum	NOUN
fuelectenerg-402	68	22	to	to	ADP
fuelectenerg-402	68	23	a	a	DET
fuelectenerg-402	68	24	file	file	NOUN
fuelectenerg-402	68	25	.	.	PUNCT
fuelectenerg-402	69	1	a	a	DET
fuelectenerg-402	69	2	diagram	diagram	NOUN
fuelectenerg-402	69	3	showing	show	VERB
fuelectenerg-402	69	4	the	the	DET
fuelectenerg-402	69	5	experimentally	experimentally	ADV
fuelectenerg-402	69	6	obtained	obtain	VERB
fuelectenerg-402	69	7	dependences	dependence	NOUN
fuelectenerg-402	69	8	of	of	ADP
fuelectenerg-402	69	9	rbr	rbr	NOUN
fuelectenerg-402	69	10	on	on	ADP
fuelectenerg-402	69	11	the	the	DET
fuelectenerg-402	69	12	temperature	temperature	NOUN
fuelectenerg-402	69	13	t	t	NOUN
fuelectenerg-402	69	14	for	for	ADP
fuelectenerg-402	69	15	the	the	DET
fuelectenerg-402	69	16	three	three	NUM
fuelectenerg-402	69	17	tested	test	VERB
fuelectenerg-402	69	18	sensors	sensor	NOUN
fuelectenerg-402	69	19	is	be	AUX
fuelectenerg-402	69	20	shown	show	VERB
fuelectenerg-402	69	21	in	in	ADP
fuelectenerg-402	69	22	fig	fig	NOUN
fuelectenerg-402	69	23	.	.	PUNCT
fuelectenerg-402	70	1	4	4	X
fuelectenerg-402	70	2	.	.	X
fuelectenerg-402	70	3	in	in	ADP
fuelectenerg-402	70	4	order	order	NOUN
fuelectenerg-402	70	5	to	to	PART
fuelectenerg-402	70	6	evaluate	evaluate	VERB
fuelectenerg-402	70	7	the	the	DET
fuelectenerg-402	70	8	temperature	temperature	NOUN
fuelectenerg-402	70	9	measurement	measurement	NOUN
fuelectenerg-402	70	10	performance	performance	NOUN
fuelectenerg-402	70	11	of	of	ADP
fuelectenerg-402	70	12	the	the	DET
fuelectenerg-402	70	13	tested	test	VERB
fuelectenerg-402	70	14	sensors	sensor	NOUN
fuelectenerg-402	70	15	without	without	ADP
fuelectenerg-402	70	16	any	any	DET
fuelectenerg-402	70	17	sensor	sensor	NOUN
fuelectenerg-402	70	18	correction	correction	NOUN
fuelectenerg-402	70	19	method	method	NOUN
fuelectenerg-402	70	20	applied	apply	VERB
fuelectenerg-402	70	21	,	,	PUNCT
fuelectenerg-402	70	22	a	a	DET
fuelectenerg-402	70	23	linear	linear	ADJ
fuelectenerg-402	70	24	calibration	calibration	NOUN
fuelectenerg-402	70	25	function	function	NOUN
fuelectenerg-402	70	26	is	be	AUX
fuelectenerg-402	70	27	used	use	VERB
fuelectenerg-402	70	28	.	.	PUNCT
fuelectenerg-402	71	1	its	its	PRON
fuelectenerg-402	71	2	parameters	parameter	NOUN
fuelectenerg-402	71	3	are	be	AUX
fuelectenerg-402	71	4	calculated	calculate	VERB
fuelectenerg-402	71	5	by	by	ADP
fuelectenerg-402	71	6	fitting	fit	VERB
fuelectenerg-402	71	7	it	it	PRON
fuelectenerg-402	71	8	to	to	ADP
fuelectenerg-402	71	9	the	the	DET
fuelectenerg-402	71	10	obtained	obtain	VERB
fuelectenerg-402	71	11	characterization	characterization	NOUN
fuelectenerg-402	71	12	data	datum	NOUN
fuelectenerg-402	71	13	of	of	ADP
fuelectenerg-402	71	14	each	each	PRON
fuelectenerg-402	71	15	of	of	ADP
fuelectenerg-402	71	16	the	the	DET
fuelectenerg-402	71	17	sensors	sensor	NOUN
fuelectenerg-402	71	18	,	,	PUNCT
fuelectenerg-402	71	19	using	use	VERB
fuelectenerg-402	71	20	the	the	DET
fuelectenerg-402	71	21	least	least	ADJ
fuelectenerg-402	71	22	squares	square	NOUN
fuelectenerg-402	71	23	method	method	NOUN
fuelectenerg-402	71	24	[	[	X
fuelectenerg-402	71	25	12	12	NUM
fuelectenerg-402	71	26	]	]	PUNCT
fuelectenerg-402	71	27	.	.	PUNCT
fuelectenerg-402	72	1	the	the	DET
fuelectenerg-402	72	2	temperature	temperature	NOUN
fuelectenerg-402	72	3	measurement	measurement	NOUN
fuelectenerg-402	72	4	error	error	NOUN
fuelectenerg-402	72	5	is	be	AUX
fuelectenerg-402	72	6	calculated	calculate	VERB
fuelectenerg-402	72	7	as	as	ADP
fuelectenerg-402	72	8	the	the	DET
fuelectenerg-402	72	9	difference	difference	NOUN
fuelectenerg-402	72	10	between	between	ADP
fuelectenerg-402	72	11	the	the	DET
fuelectenerg-402	72	12	obtained	obtain	VERB
fuelectenerg-402	72	13	temperature	temperature	NOUN
fuelectenerg-402	72	14	indication	indication	NOUN
fuelectenerg-402	72	15	and	and	CCONJ
fuelectenerg-402	72	16	the	the	DET
fuelectenerg-402	72	17	temperature	temperature	NOUN
fuelectenerg-402	72	18	value	value	NOUN
fuelectenerg-402	72	19	measured	measure	VERB
fuelectenerg-402	72	20	using	use	VERB
fuelectenerg-402	72	21	the	the	DET
fuelectenerg-402	72	22	pt-100	pt-100	PROPN
fuelectenerg-402	72	23	sensor	sensor	NOUN
fuelectenerg-402	72	24	,	,	PUNCT
fuelectenerg-402	72	25	at	at	ADP
fuelectenerg-402	72	26	all	all	DET
fuelectenerg-402	72	27	the	the	DET
fuelectenerg-402	72	28	set	set	VERB
fuelectenerg-402	72	29	temperatures	temperature	NOUN
fuelectenerg-402	72	30	.	.	PUNCT
fuelectenerg-402	73	1	the	the	DET
fuelectenerg-402	73	2	results	result	NOUN
fuelectenerg-402	73	3	are	be	AUX
fuelectenerg-402	73	4	shown	show	VERB
fuelectenerg-402	73	5	graphically	graphically	ADV
fuelectenerg-402	73	6	in	in	ADP
fuelectenerg-402	73	7	fig	fig	NOUN
fuelectenerg-402	73	8	.	.	PUNCT
fuelectenerg-402	74	1	5	5	X
fuelectenerg-402	74	2	.	.	X
fuelectenerg-402	74	3	it	it	PRON
fuelectenerg-402	74	4	can	can	AUX
fuelectenerg-402	74	5	be	be	AUX
fuelectenerg-402	74	6	concluded	conclude	VERB
fuelectenerg-402	74	7	from	from	ADP
fuelectenerg-402	74	8	the	the	DET
fuelectenerg-402	74	9	diagram	diagram	NOUN
fuelectenerg-402	74	10	that	that	PRON
fuelectenerg-402	74	11	the	the	DET
fuelectenerg-402	74	12	temperature	temperature	NOUN
fuelectenerg-402	74	13	measurement	measurement	NOUN
fuelectenerg-402	74	14	error	error	NOUN
fuelectenerg-402	74	15	exhibited	exhibit	VERB
fuelectenerg-402	74	16	by	by	ADP
fuelectenerg-402	74	17	the	the	DET
fuelectenerg-402	74	18	tested	test	VERB
fuelectenerg-402	74	19	sensors	sensor	NOUN
fuelectenerg-402	74	20	is	be	AUX
fuelectenerg-402	74	21	within	within	ADP
fuelectenerg-402	74	22	±	±	NUM
fuelectenerg-402	74	23	4	4	NUM
fuelectenerg-402	74	24	°	°	NOUN
fuelectenerg-402	74	25	c	c	NOUN
fuelectenerg-402	74	26	.	.	PUNCT
fuelectenerg-402	75	1	fig	fig	NOUN
fuelectenerg-402	75	2	.	.	PUNCT
fuelectenerg-402	76	1	4	4	NUM
fuelectenerg-402	76	2	experimentally	experimentally	ADV
fuelectenerg-402	76	3	obtained	obtain	VERB
fuelectenerg-402	76	4	dependences	dependence	NOUN
fuelectenerg-402	76	5	of	of	ADP
fuelectenerg-402	76	6	the	the	DET
fuelectenerg-402	76	7	resistance	resistance	NOUN
fuelectenerg-402	76	8	rbr	rbr	NOUN
fuelectenerg-402	76	9	on	on	ADP
fuelectenerg-402	76	10	temperature	temperature	NOUN
fuelectenerg-402	76	11	t	t	NOUN
fuelectenerg-402	76	12	for	for	ADP
fuelectenerg-402	76	13	three	three	NUM
fuelectenerg-402	76	14	tested	test	VERB
fuelectenerg-402	76	15	sensors	sensor	NOUN
fuelectenerg-402	76	16	128	128	NUM
fuelectenerg-402	76	17	m.	m.	NOUN
fuelectenerg-402	76	18	frantlović	frantlović	NOUN
fuelectenerg-402	76	19	,	,	PUNCT
fuelectenerg-402	76	20	i.	i.	PROPN
fuelectenerg-402	76	21	jokić	jokić	PROPN
fuelectenerg-402	76	22	,	,	PUNCT
fuelectenerg-402	76	23	ž	ž	PROPN
fuelectenerg-402	76	24	.	.	PUNCT
fuelectenerg-402	76	25	lazić	lazić	PROPN
fuelectenerg-402	76	26	,	,	PUNCT
fuelectenerg-402	76	27	et	et	PROPN
fuelectenerg-402	76	28	al	al	PROPN
fuelectenerg-402	76	29	.	.	PROPN
fuelectenerg-402	76	30	fig	fig	PROPN
fuelectenerg-402	76	31	.	.	PUNCT
fuelectenerg-402	77	1	5	5	NUM
fuelectenerg-402	77	2	temperature	temperature	NOUN
fuelectenerg-402	77	3	measurement	measurement	NOUN
fuelectenerg-402	77	4	error	error	NOUN
fuelectenerg-402	77	5	δт	δт	NOUN
fuelectenerg-402	77	6	as	as	ADP
fuelectenerg-402	77	7	a	a	DET
fuelectenerg-402	77	8	function	function	NOUN
fuelectenerg-402	77	9	of	of	ADP
fuelectenerg-402	77	10	temperature	temperature	NOUN
fuelectenerg-402	77	11	t	t	NOUN
fuelectenerg-402	77	12	for	for	ADP
fuelectenerg-402	77	13	three	three	NUM
fuelectenerg-402	77	14	tested	test	VERB
fuelectenerg-402	77	15	sensors	sensor	NOUN
fuelectenerg-402	77	16	,	,	PUNCT
fuelectenerg-402	77	17	without	without	ADP
fuelectenerg-402	77	18	sensor	sensor	NOUN
fuelectenerg-402	77	19	correction	correction	NOUN
fuelectenerg-402	77	20	2.2	2.2	NUM
fuelectenerg-402	77	21	.	.	PUNCT
fuelectenerg-402	78	1	sensor	sensor	NOUN
fuelectenerg-402	78	2	correction	correction	NOUN
fuelectenerg-402	78	3	method	method	NOUN
fuelectenerg-402	78	4	in	in	ADP
fuelectenerg-402	78	5	order	order	NOUN
fuelectenerg-402	78	6	to	to	PART
fuelectenerg-402	78	7	improve	improve	VERB
fuelectenerg-402	78	8	the	the	DET
fuelectenerg-402	78	9	measurement	measurement	NOUN
fuelectenerg-402	78	10	performance	performance	NOUN
fuelectenerg-402	78	11	,	,	PUNCT
fuelectenerg-402	78	12	a	a	DET
fuelectenerg-402	78	13	suitable	suitable	ADJ
fuelectenerg-402	78	14	sensor	sensor	NOUN
fuelectenerg-402	78	15	correction	correction	NOUN
fuelectenerg-402	78	16	method	method	NOUN
fuelectenerg-402	78	17	must	must	AUX
fuelectenerg-402	78	18	be	be	AUX
fuelectenerg-402	78	19	applied	apply	VERB
fuelectenerg-402	78	20	.	.	PUNCT
fuelectenerg-402	79	1	in	in	ADP
fuelectenerg-402	79	2	this	this	DET
fuelectenerg-402	79	3	case	case	NOUN
fuelectenerg-402	79	4	a	a	DET
fuelectenerg-402	79	5	third	third	ADJ
fuelectenerg-402	79	6	order	order	NOUN
fuelectenerg-402	79	7	polynomial	polynomial	NOUN
fuelectenerg-402	79	8	has	have	AUX
fuelectenerg-402	79	9	been	be	AUX
fuelectenerg-402	79	10	chosen	choose	VERB
fuelectenerg-402	79	11	for	for	ADP
fuelectenerg-402	79	12	the	the	DET
fuelectenerg-402	79	13	sensor	sensor	NOUN
fuelectenerg-402	79	14	calibration	calibration	NOUN
fuelectenerg-402	79	15	function	function	NOUN
fuelectenerg-402	79	16	.	.	PUNCT
fuelectenerg-402	80	1	its	its	PRON
fuelectenerg-402	80	2	parameters	parameter	NOUN
fuelectenerg-402	80	3	were	be	AUX
fuelectenerg-402	80	4	determined	determine	VERB
fuelectenerg-402	80	5	by	by	ADP
fuelectenerg-402	80	6	fitting	fit	VERB
fuelectenerg-402	80	7	it	it	PRON
fuelectenerg-402	80	8	to	to	ADP
fuelectenerg-402	80	9	the	the	DET
fuelectenerg-402	80	10	sensor	sensor	NOUN
fuelectenerg-402	80	11	characterization	characterization	NOUN
fuelectenerg-402	80	12	data	datum	NOUN
fuelectenerg-402	80	13	,	,	PUNCT
fuelectenerg-402	80	14	using	use	VERB
fuelectenerg-402	80	15	the	the	DET
fuelectenerg-402	80	16	least	least	ADJ
fuelectenerg-402	80	17	squares	square	NOUN
fuelectenerg-402	80	18	method	method	NOUN
fuelectenerg-402	80	19	[	[	X
fuelectenerg-402	80	20	12	12	NUM
fuelectenerg-402	80	21	]	]	PUNCT
fuelectenerg-402	80	22	.	.	PUNCT
fuelectenerg-402	81	1	a	a	DET
fuelectenerg-402	81	2	diagram	diagram	NOUN
fuelectenerg-402	81	3	showing	show	VERB
fuelectenerg-402	81	4	the	the	DET
fuelectenerg-402	81	5	calibration	calibration	NOUN
fuelectenerg-402	81	6	functions	function	NOUN
fuelectenerg-402	81	7	obtained	obtain	VERB
fuelectenerg-402	81	8	in	in	ADP
fuelectenerg-402	81	9	this	this	DET
fuelectenerg-402	81	10	way	way	NOUN
fuelectenerg-402	81	11	for	for	SCONJ
fuelectenerg-402	81	12	the	the	DET
fuelectenerg-402	81	13	three	three	NUM
fuelectenerg-402	81	14	tested	test	VERB
fuelectenerg-402	81	15	sensors	sensor	NOUN
fuelectenerg-402	81	16	is	be	AUX
fuelectenerg-402	81	17	given	give	VERB
fuelectenerg-402	81	18	in	in	ADP
fuelectenerg-402	81	19	fig	fig	NOUN
fuelectenerg-402	81	20	.	.	PUNCT
fuelectenerg-402	82	1	6	6	NUM
fuelectenerg-402	82	2	.	.	NOUN
fuelectenerg-402	82	3	3	3	NUM
fuelectenerg-402	82	4	.	.	NOUN
fuelectenerg-402	82	5	results	result	NOUN
fuelectenerg-402	82	6	&	&	CCONJ
fuelectenerg-402	82	7	discussion	discussion	NOUN
fuelectenerg-402	82	8	temperature	temperature	NOUN
fuelectenerg-402	82	9	measurement	measurement	NOUN
fuelectenerg-402	82	10	error	error	NOUN
fuelectenerg-402	82	11	with	with	ADP
fuelectenerg-402	82	12	the	the	DET
fuelectenerg-402	82	13	described	describe	VERB
fuelectenerg-402	82	14	correction	correction	NOUN
fuelectenerg-402	82	15	method	method	NOUN
fuelectenerg-402	82	16	applied	apply	VERB
fuelectenerg-402	82	17	can	can	AUX
fuelectenerg-402	82	18	be	be	AUX
fuelectenerg-402	82	19	estimated	estimate	VERB
fuelectenerg-402	82	20	by	by	ADP
fuelectenerg-402	82	21	calculations	calculation	NOUN
fuelectenerg-402	82	22	performed	perform	VERB
fuelectenerg-402	82	23	using	use	VERB
fuelectenerg-402	82	24	the	the	DET
fuelectenerg-402	82	25	characterization	characterization	NOUN
fuelectenerg-402	82	26	data	datum	NOUN
fuelectenerg-402	82	27	obtained	obtain	VERB
fuelectenerg-402	82	28	in	in	ADP
fuelectenerg-402	82	29	2.1	2.1	NUM
fuelectenerg-402	82	30	.	.	PUNCT
fuelectenerg-402	83	1	such	such	DET
fuelectenerg-402	83	2	a	a	DET
fuelectenerg-402	83	3	calculation	calculation	NOUN
fuelectenerg-402	83	4	indicates	indicate	VERB
fuelectenerg-402	83	5	that	that	SCONJ
fuelectenerg-402	83	6	the	the	DET
fuelectenerg-402	83	7	temperature	temperature	NOUN
fuelectenerg-402	83	8	measurement	measurement	NOUN
fuelectenerg-402	83	9	error	error	NOUN
fuelectenerg-402	83	10	is	be	AUX
fuelectenerg-402	83	11	within	within	ADP
fuelectenerg-402	83	12	±	±	NUM
fuelectenerg-402	83	13	0.3	0.3	NUM
fuelectenerg-402	83	14	°	°	ADP
fuelectenerg-402	83	15	c	c	NOUN
fuelectenerg-402	83	16	for	for	ADP
fuelectenerg-402	83	17	the	the	DET
fuelectenerg-402	83	18	three	three	NUM
fuelectenerg-402	83	19	tested	test	VERB
fuelectenerg-402	83	20	sensors	sensor	NOUN
fuelectenerg-402	83	21	.	.	PUNCT
fuelectenerg-402	84	1	in	in	ADP
fuelectenerg-402	84	2	order	order	NOUN
fuelectenerg-402	84	3	to	to	PART
fuelectenerg-402	84	4	experimentally	experimentally	ADV
fuelectenerg-402	84	5	verify	verify	VERB
fuelectenerg-402	84	6	that	that	SCONJ
fuelectenerg-402	84	7	the	the	DET
fuelectenerg-402	84	8	performance	performance	NOUN
fuelectenerg-402	84	9	expected	expect	VERB
fuelectenerg-402	84	10	based	base	VERB
fuelectenerg-402	84	11	on	on	ADP
fuelectenerg-402	84	12	calculations	calculation	NOUN
fuelectenerg-402	84	13	can	can	AUX
fuelectenerg-402	84	14	be	be	AUX
fuelectenerg-402	84	15	achieved	achieve	VERB
fuelectenerg-402	84	16	in	in	ADP
fuelectenerg-402	84	17	real	real	ADJ
fuelectenerg-402	84	18	applications	application	NOUN
fuelectenerg-402	84	19	,	,	PUNCT
fuelectenerg-402	84	20	a	a	DET
fuelectenerg-402	84	21	series	series	NOUN
fuelectenerg-402	84	22	of	of	ADP
fuelectenerg-402	84	23	temperature	temperature	NOUN
fuelectenerg-402	84	24	measurements	measurement	NOUN
fuelectenerg-402	84	25	was	be	AUX
fuelectenerg-402	84	26	performed	perform	VERB
fuelectenerg-402	84	27	using	use	VERB
fuelectenerg-402	84	28	the	the	DET
fuelectenerg-402	84	29	same	same	ADJ
fuelectenerg-402	84	30	sensors	sensor	NOUN
fuelectenerg-402	84	31	with	with	ADP
fuelectenerg-402	84	32	the	the	DET
fuelectenerg-402	84	33	described	describe	VERB
fuelectenerg-402	84	34	correction	correction	NOUN
fuelectenerg-402	84	35	method	method	NOUN
fuelectenerg-402	84	36	applied	apply	VERB
fuelectenerg-402	84	37	.	.	PUNCT
fuelectenerg-402	85	1	the	the	DET
fuelectenerg-402	85	2	time	time	NOUN
fuelectenerg-402	85	3	interval	interval	NOUN
fuelectenerg-402	85	4	between	between	ADP
fuelectenerg-402	85	5	the	the	DET
fuelectenerg-402	85	6	sensor	sensor	NOUN
fuelectenerg-402	85	7	characterization	characterization	NOUN
fuelectenerg-402	85	8	and	and	CCONJ
fuelectenerg-402	85	9	the	the	DET
fuelectenerg-402	85	10	new	new	ADJ
fuelectenerg-402	85	11	series	series	NOUN
fuelectenerg-402	85	12	of	of	ADP
fuelectenerg-402	85	13	measurements	measurement	NOUN
fuelectenerg-402	85	14	was	be	AUX
fuelectenerg-402	85	15	approximately	approximately	ADV
fuelectenerg-402	85	16	six	six	NUM
fuelectenerg-402	85	17	months	month	NOUN
fuelectenerg-402	85	18	.	.	PUNCT
fuelectenerg-402	86	1	an	an	DET
fuelectenerg-402	86	2	offset	offset	ADJ
fuelectenerg-402	86	3	correction	correction	NOUN
fuelectenerg-402	86	4	was	be	AUX
fuelectenerg-402	86	5	subsequently	subsequently	ADV
fuelectenerg-402	86	6	performed	perform	VERB
fuelectenerg-402	86	7	at	at	ADP
fuelectenerg-402	86	8	20	20	NUM
fuelectenerg-402	86	9	°	°	NOUN
fuelectenerg-402	86	10	c	c	NOUN
fuelectenerg-402	86	11	.	.	PUNCT
fuelectenerg-402	87	1	a	a	DET
fuelectenerg-402	87	2	diagram	diagram	NOUN
fuelectenerg-402	87	3	showing	show	VERB
fuelectenerg-402	87	4	the	the	DET
fuelectenerg-402	87	5	temperature	temperature	NOUN
fuelectenerg-402	87	6	measurement	measurement	NOUN
fuelectenerg-402	87	7	error	error	NOUN
fuelectenerg-402	87	8	as	as	ADP
fuelectenerg-402	87	9	a	a	DET
fuelectenerg-402	87	10	function	function	NOUN
fuelectenerg-402	87	11	of	of	ADP
fuelectenerg-402	87	12	temperature	temperature	NOUN
fuelectenerg-402	87	13	for	for	ADP
fuelectenerg-402	87	14	the	the	DET
fuelectenerg-402	87	15	three	three	NUM
fuelectenerg-402	87	16	tested	test	VERB
fuelectenerg-402	87	17	sensors	sensor	NOUN
fuelectenerg-402	87	18	is	be	AUX
fuelectenerg-402	87	19	shown	show	VERB
fuelectenerg-402	87	20	in	in	ADP
fuelectenerg-402	87	21	fig	fig	NOUN
fuelectenerg-402	87	22	.	.	PUNCT
fuelectenerg-402	88	1	7	7	X
fuelectenerg-402	88	2	.	.	X
fuelectenerg-402	88	3	it	it	PRON
fuelectenerg-402	88	4	can	can	AUX
fuelectenerg-402	88	5	be	be	AUX
fuelectenerg-402	88	6	seen	see	VERB
fuelectenerg-402	88	7	from	from	ADP
fuelectenerg-402	88	8	the	the	DET
fuelectenerg-402	88	9	diagram	diagram	NOUN
fuelectenerg-402	88	10	that	that	PRON
fuelectenerg-402	88	11	the	the	DET
fuelectenerg-402	88	12	measurement	measurement	NOUN
fuelectenerg-402	88	13	error	error	NOUN
fuelectenerg-402	88	14	exhibited	exhibit	VERB
fuelectenerg-402	88	15	by	by	ADP
fuelectenerg-402	88	16	the	the	DET
fuelectenerg-402	88	17	tested	test	VERB
fuelectenerg-402	88	18	sensors	sensor	NOUN
fuelectenerg-402	88	19	is	be	AUX
fuelectenerg-402	88	20	indeed	indeed	ADV
fuelectenerg-402	88	21	within	within	ADP
fuelectenerg-402	88	22	±	±	NUM
fuelectenerg-402	88	23	0.3	0.3	NUM
fuelectenerg-402	88	24	°	°	SYM
fuelectenerg-402	88	25	c	c	NOUN
fuelectenerg-402	88	26	.	.	PUNCT
fuelectenerg-402	89	1	this	this	DET
fuelectenerg-402	89	2	result	result	NOUN
fuelectenerg-402	89	3	represents	represent	VERB
fuelectenerg-402	89	4	a	a	DET
fuelectenerg-402	89	5	great	great	ADJ
fuelectenerg-402	89	6	improvement	improvement	NOUN
fuelectenerg-402	89	7	achieved	achieve	VERB
fuelectenerg-402	89	8	by	by	ADP
fuelectenerg-402	89	9	using	use	VERB
fuelectenerg-402	89	10	the	the	DET
fuelectenerg-402	89	11	proposed	propose	VERB
fuelectenerg-402	89	12	sensor	sensor	NOUN
fuelectenerg-402	89	13	correction	correction	NOUN
fuelectenerg-402	89	14	method	method	NOUN
fuelectenerg-402	89	15	,	,	PUNCT
fuelectenerg-402	89	16	since	since	SCONJ
fuelectenerg-402	89	17	the	the	DET
fuelectenerg-402	89	18	temperature	temperature	NOUN
fuelectenerg-402	89	19	measurement	measurement	NOUN
fuelectenerg-402	89	20	error	error	NOUN
fuelectenerg-402	89	21	is	be	AUX
fuelectenerg-402	89	22	reduced	reduce	VERB
fuelectenerg-402	89	23	by	by	ADP
fuelectenerg-402	89	24	at	at	ADV
fuelectenerg-402	89	25	least	least	ADV
fuelectenerg-402	89	26	10	10	NUM
fuelectenerg-402	89	27	times	time	NOUN
fuelectenerg-402	89	28	compared	compare	VERB
fuelectenerg-402	89	29	to	to	ADP
fuelectenerg-402	89	30	the	the	DET
fuelectenerg-402	89	31	results	result	NOUN
fuelectenerg-402	89	32	obtained	obtain	VERB
fuelectenerg-402	89	33	without	without	ADP
fuelectenerg-402	89	34	the	the	DET
fuelectenerg-402	89	35	correction	correction	NOUN
fuelectenerg-402	89	36	method	method	NOUN
fuelectenerg-402	89	37	applied	apply	VERB
fuelectenerg-402	89	38	.	.	PUNCT
fuelectenerg-402	90	1	temperature	temperature	NOUN
fuelectenerg-402	90	2	measurement	measurement	NOUN
fuelectenerg-402	90	3	performance	performance	NOUN
fuelectenerg-402	90	4	of	of	ADP
fuelectenerg-402	90	5	silicon	silicon	NOUN
fuelectenerg-402	90	6	piezoresistive	piezoresistive	ADJ
fuelectenerg-402	90	7	mems	mem	NOUN
fuelectenerg-402	90	8	pressure	pressure	NOUN
fuelectenerg-402	90	9	sensors	sensor	NOUN
fuelectenerg-402	90	10	...	...	PUNCT
fuelectenerg-402	90	11	129	129	NUM
fuelectenerg-402	90	12	fig	fig	NOUN
fuelectenerg-402	90	13	.	.	PUNCT
fuelectenerg-402	91	1	6	6	NUM
fuelectenerg-402	91	2	calibration	calibration	NOUN
fuelectenerg-402	91	3	functions	function	NOUN
fuelectenerg-402	91	4	of	of	ADP
fuelectenerg-402	91	5	three	three	NUM
fuelectenerg-402	91	6	tested	test	VERB
fuelectenerg-402	91	7	sensors	sensor	NOUN
fuelectenerg-402	91	8	the	the	DET
fuelectenerg-402	91	9	achieved	achieve	VERB
fuelectenerg-402	91	10	measurement	measurement	NOUN
fuelectenerg-402	91	11	accuracy	accuracy	NOUN
fuelectenerg-402	91	12	is	be	AUX
fuelectenerg-402	91	13	better	well	ADJ
fuelectenerg-402	91	14	than	than	ADP
fuelectenerg-402	91	15	that	that	PRON
fuelectenerg-402	91	16	of	of	ADP
fuelectenerg-402	91	17	thermocouples	thermocouple	NOUN
fuelectenerg-402	91	18	and	and	CCONJ
fuelectenerg-402	91	19	also	also	ADV
fuelectenerg-402	91	20	surpasses	surpass	VERB
fuelectenerg-402	91	21	a	a	DET
fuelectenerg-402	91	22	majority	majority	NOUN
fuelectenerg-402	91	23	of	of	ADP
fuelectenerg-402	91	24	dedicated	dedicated	ADJ
fuelectenerg-402	91	25	semiconductor	semiconductor	NOUN
fuelectenerg-402	91	26	-	-	PUNCT
fuelectenerg-402	91	27	based	base	VERB
fuelectenerg-402	91	28	temperature	temperature	NOUN
fuelectenerg-402	91	29	sensors	sensor	NOUN
fuelectenerg-402	91	30	.	.	PUNCT
fuelectenerg-402	92	1	however	however	ADV
fuelectenerg-402	92	2	,	,	PUNCT
fuelectenerg-402	92	3	typical	typical	ADJ
fuelectenerg-402	92	4	industrial	industrial	ADJ
fuelectenerg-402	92	5	pressure	pressure	NOUN
fuelectenerg-402	92	6	sensors	sensor	NOUN
fuelectenerg-402	92	7	are	be	AUX
fuelectenerg-402	92	8	neither	neither	CCONJ
fuelectenerg-402	92	9	designed	design	VERB
fuelectenerg-402	92	10	nor	nor	CCONJ
fuelectenerg-402	92	11	optimized	optimize	VERB
fuelectenerg-402	92	12	for	for	ADP
fuelectenerg-402	92	13	temperature	temperature	NOUN
fuelectenerg-402	92	14	measurement	measurement	NOUN
fuelectenerg-402	92	15	,	,	PUNCT
fuelectenerg-402	92	16	so	so	SCONJ
fuelectenerg-402	92	17	there	there	PRON
fuelectenerg-402	92	18	are	be	VERB
fuelectenerg-402	92	19	some	some	DET
fuelectenerg-402	92	20	disadvantages	disadvantage	NOUN
fuelectenerg-402	92	21	and	and	CCONJ
fuelectenerg-402	92	22	limitations	limitation	NOUN
fuelectenerg-402	92	23	that	that	PRON
fuelectenerg-402	92	24	must	must	AUX
fuelectenerg-402	92	25	be	be	AUX
fuelectenerg-402	92	26	considered	consider	VERB
fuelectenerg-402	92	27	in	in	ADP
fuelectenerg-402	92	28	practical	practical	ADJ
fuelectenerg-402	92	29	applications	application	NOUN
fuelectenerg-402	92	30	.	.	PUNCT
fuelectenerg-402	93	1	the	the	DET
fuelectenerg-402	93	2	temperature	temperature	NOUN
fuelectenerg-402	93	3	range	range	NOUN
fuelectenerg-402	93	4	,	,	PUNCT
fuelectenerg-402	93	5	size	size	NOUN
fuelectenerg-402	93	6	and	and	CCONJ
fuelectenerg-402	93	7	shape	shape	NOUN
fuelectenerg-402	93	8	,	,	PUNCT
fuelectenerg-402	93	9	and	and	CCONJ
fuelectenerg-402	93	10	dynamic	dynamic	ADJ
fuelectenerg-402	93	11	behavior	behavior	NOUN
fuelectenerg-402	93	12	of	of	ADP
fuelectenerg-402	93	13	the	the	DET
fuelectenerg-402	93	14	sensors	sensor	NOUN
fuelectenerg-402	93	15	are	be	AUX
fuelectenerg-402	93	16	the	the	DET
fuelectenerg-402	93	17	most	most	ADV
fuelectenerg-402	93	18	important	important	ADJ
fuelectenerg-402	93	19	limitations	limitation	NOUN
fuelectenerg-402	93	20	,	,	PUNCT
fuelectenerg-402	93	21	and	and	CCONJ
fuelectenerg-402	93	22	therefore	therefore	ADV
fuelectenerg-402	93	23	will	will	AUX
fuelectenerg-402	93	24	be	be	AUX
fuelectenerg-402	93	25	discussed	discuss	VERB
fuelectenerg-402	93	26	here	here	ADV
fuelectenerg-402	93	27	.	.	PUNCT
fuelectenerg-402	94	1	the	the	DET
fuelectenerg-402	94	2	temperature	temperature	NOUN
fuelectenerg-402	94	3	range	range	NOUN
fuelectenerg-402	94	4	of	of	ADP
fuelectenerg-402	94	5	a	a	DET
fuelectenerg-402	94	6	silicon	silicon	NOUN
fuelectenerg-402	94	7	piezoresistive	piezoresistive	ADJ
fuelectenerg-402	94	8	sensing	sense	VERB
fuelectenerg-402	94	9	element	element	NOUN
fuelectenerg-402	94	10	is	be	AUX
fuelectenerg-402	94	11	predominantly	predominantly	ADV
fuelectenerg-402	94	12	determined	determine	VERB
fuelectenerg-402	94	13	by	by	ADP
fuelectenerg-402	94	14	the	the	DET
fuelectenerg-402	94	15	physical	physical	ADJ
fuelectenerg-402	94	16	properties	property	NOUN
fuelectenerg-402	94	17	of	of	ADP
fuelectenerg-402	94	18	silicon	silicon	NOUN
fuelectenerg-402	94	19	as	as	ADP
fuelectenerg-402	94	20	a	a	DET
fuelectenerg-402	94	21	semiconductor	semiconductor	NOUN
fuelectenerg-402	94	22	material	material	NOUN
fuelectenerg-402	94	23	.	.	PUNCT
fuelectenerg-402	95	1	it	it	PRON
fuelectenerg-402	95	2	extends	extend	VERB
fuelectenerg-402	95	3	from	from	ADP
fuelectenerg-402	95	4	cryogenic	cryogenic	ADJ
fuelectenerg-402	95	5	temperatures	temperature	NOUN
fuelectenerg-402	95	6	to	to	ADP
fuelectenerg-402	95	7	130	130	NUM
fuelectenerg-402	95	8	°	°	NOUN
fuelectenerg-402	95	9	c	c	NOUN
fuelectenerg-402	95	10	,	,	PUNCT
fuelectenerg-402	95	11	whereas	whereas	SCONJ
fuelectenerg-402	95	12	platinum	platinum	NOUN
fuelectenerg-402	95	13	resistance	resistance	NOUN
fuelectenerg-402	95	14	thermometers	thermometer	NOUN
fuelectenerg-402	95	15	can	can	AUX
fuelectenerg-402	95	16	measure	measure	VERB
fuelectenerg-402	95	17	temperatures	temperature	NOUN
fuelectenerg-402	95	18	up	up	ADP
fuelectenerg-402	95	19	to	to	ADP
fuelectenerg-402	95	20	600	600	NUM
fuelectenerg-402	95	21	°	°	NOUN
fuelectenerg-402	95	22	c	c	NOUN
fuelectenerg-402	95	23	,	,	PUNCT
fuelectenerg-402	95	24	and	and	CCONJ
fuelectenerg-402	95	25	certain	certain	ADJ
fuelectenerg-402	95	26	types	type	NOUN
fuelectenerg-402	95	27	of	of	ADP
fuelectenerg-402	95	28	thermocouples	thermocouple	NOUN
fuelectenerg-402	95	29	beyond	beyond	ADP
fuelectenerg-402	95	30	1000	1000	NUM
fuelectenerg-402	95	31	°	°	NOUN
fuelectenerg-402	95	32	c	c	NOUN
fuelectenerg-402	95	33	.	.	PUNCT
fuelectenerg-402	96	1	there	there	PRON
fuelectenerg-402	96	2	is	be	VERB
fuelectenerg-402	96	3	,	,	PUNCT
fuelectenerg-402	96	4	however	however	ADV
fuelectenerg-402	96	5	,	,	PUNCT
fuelectenerg-402	96	6	a	a	DET
fuelectenerg-402	96	7	multitude	multitude	NOUN
fuelectenerg-402	96	8	of	of	ADP
fuelectenerg-402	96	9	applications	application	NOUN
fuelectenerg-402	96	10	where	where	SCONJ
fuelectenerg-402	96	11	the	the	DET
fuelectenerg-402	96	12	temperature	temperature	NOUN
fuelectenerg-402	96	13	is	be	AUX
fuelectenerg-402	96	14	below	below	ADP
fuelectenerg-402	96	15	130	130	NUM
fuelectenerg-402	96	16	°	°	NOUN
fuelectenerg-402	96	17	c	c	NOUN
fuelectenerg-402	96	18	,	,	PUNCT
fuelectenerg-402	96	19	including	include	VERB
fuelectenerg-402	96	20	liquid	liquid	ADJ
fuelectenerg-402	96	21	fuel	fuel	NOUN
fuelectenerg-402	96	22	or	or	CCONJ
fuelectenerg-402	96	23	water	water	NOUN
fuelectenerg-402	96	24	tanks	tank	NOUN
fuelectenerg-402	96	25	and	and	CCONJ
fuelectenerg-402	96	26	pipelines	pipeline	NOUN
fuelectenerg-402	96	27	,	,	PUNCT
fuelectenerg-402	96	28	heating	heating	NOUN
fuelectenerg-402	96	29	,	,	PUNCT
fuelectenerg-402	96	30	ventilating	ventilating	NOUN
fuelectenerg-402	96	31	,	,	PUNCT
fuelectenerg-402	96	32	and	and	CCONJ
fuelectenerg-402	96	33	air	air	NOUN
fuelectenerg-402	96	34	conditioning	conditioning	NOUN
fuelectenerg-402	96	35	(	(	PUNCT
fuelectenerg-402	96	36	hvac	hvac	NOUN
fuelectenerg-402	96	37	)	)	PUNCT
fuelectenerg-402	96	38	systems	system	NOUN
fuelectenerg-402	96	39	etc	etc	X
fuelectenerg-402	96	40	.	.	X
fuelectenerg-402	96	41	the	the	DET
fuelectenerg-402	96	42	size	size	NOUN
fuelectenerg-402	96	43	and	and	CCONJ
fuelectenerg-402	96	44	shape	shape	NOUN
fuelectenerg-402	96	45	of	of	ADP
fuelectenerg-402	96	46	pressure	pressure	NOUN
fuelectenerg-402	96	47	sensors	sensor	NOUN
fuelectenerg-402	96	48	,	,	PUNCT
fuelectenerg-402	96	49	as	as	ADV
fuelectenerg-402	96	50	well	well	ADV
fuelectenerg-402	96	51	as	as	ADP
fuelectenerg-402	96	52	their	their	PRON
fuelectenerg-402	96	53	mass	mass	ADJ
fuelectenerg-402	96	54	and	and	CCONJ
fuelectenerg-402	96	55	other	other	ADJ
fuelectenerg-402	96	56	properties	property	NOUN
fuelectenerg-402	96	57	,	,	PUNCT
fuelectenerg-402	96	58	can	can	AUX
fuelectenerg-402	96	59	differ	differ	VERB
fuelectenerg-402	96	60	significantly	significantly	ADV
fuelectenerg-402	96	61	depending	depend	VERB
fuelectenerg-402	96	62	on	on	ADP
fuelectenerg-402	96	63	intended	intended	ADJ
fuelectenerg-402	96	64	applications	application	NOUN
fuelectenerg-402	96	65	.	.	PUNCT
fuelectenerg-402	97	1	in	in	ADP
fuelectenerg-402	97	2	some	some	DET
fuelectenerg-402	97	3	cases	case	NOUN
fuelectenerg-402	97	4	the	the	DET
fuelectenerg-402	97	5	sensing	sense	VERB
fuelectenerg-402	97	6	element	element	NOUN
fuelectenerg-402	97	7	can	can	AUX
fuelectenerg-402	97	8	be	be	AUX
fuelectenerg-402	97	9	surrounded	surround	VERB
fuelectenerg-402	97	10	by	by	ADP
fuelectenerg-402	97	11	the	the	DET
fuelectenerg-402	97	12	fluid	fluid	NOUN
fuelectenerg-402	97	13	whose	whose	DET
fuelectenerg-402	97	14	pressure	pressure	NOUN
fuelectenerg-402	97	15	or	or	CCONJ
fuelectenerg-402	97	16	temperature	temperature	NOUN
fuelectenerg-402	97	17	is	be	AUX
fuelectenerg-402	97	18	measured	measure	VERB
fuelectenerg-402	97	19	,	,	PUNCT
fuelectenerg-402	97	20	with	with	ADP
fuelectenerg-402	97	21	only	only	ADV
fuelectenerg-402	97	22	a	a	DET
fuelectenerg-402	97	23	minimal	minimal	ADJ
fuelectenerg-402	97	24	mechanical	mechanical	ADJ
fuelectenerg-402	97	25	support	support	NOUN
fuelectenerg-402	97	26	,	,	PUNCT
fuelectenerg-402	97	27	whereas	whereas	SCONJ
fuelectenerg-402	97	28	in	in	ADP
fuelectenerg-402	97	29	many	many	ADJ
fuelectenerg-402	97	30	industrial	industrial	ADJ
fuelectenerg-402	97	31	applications	application	NOUN
fuelectenerg-402	97	32	a	a	DET
fuelectenerg-402	97	33	relatively	relatively	ADV
fuelectenerg-402	97	34	large	large	ADJ
fuelectenerg-402	97	35	metallic	metallic	ADJ
fuelectenerg-402	97	36	body	body	NOUN
fuelectenerg-402	97	37	with	with	ADP
fuelectenerg-402	97	38	a	a	DET
fuelectenerg-402	97	39	protective	protective	ADJ
fuelectenerg-402	97	40	oil	oil	NOUN
fuelectenerg-402	97	41	filling	filling	NOUN
fuelectenerg-402	97	42	is	be	AUX
fuelectenerg-402	97	43	required	require	VERB
fuelectenerg-402	97	44	(	(	PUNCT
fuelectenerg-402	97	45	as	as	SCONJ
fuelectenerg-402	97	46	described	describe	VERB
fuelectenerg-402	97	47	in	in	ADP
fuelectenerg-402	97	48	the	the	DET
fuelectenerg-402	97	49	introduction	introduction	NOUN
fuelectenerg-402	97	50	)	)	PUNCT
fuelectenerg-402	97	51	.	.	PUNCT
fuelectenerg-402	98	1	since	since	SCONJ
fuelectenerg-402	98	2	the	the	DET
fuelectenerg-402	98	3	thermal	thermal	ADJ
fuelectenerg-402	98	4	time	time	NOUN
fuelectenerg-402	98	5	constant	constant	ADJ
fuelectenerg-402	98	6	of	of	ADP
fuelectenerg-402	98	7	the	the	DET
fuelectenerg-402	98	8	sensing	sense	VERB
fuelectenerg-402	98	9	element	element	NOUN
fuelectenerg-402	98	10	in	in	ADP
fuelectenerg-402	98	11	the	the	DET
fuelectenerg-402	98	12	air	air	NOUN
fuelectenerg-402	98	13	is	be	AUX
fuelectenerg-402	98	14	of	of	ADP
fuelectenerg-402	98	15	the	the	DET
fuelectenerg-402	98	16	order	order	NOUN
fuelectenerg-402	98	17	of	of	ADP
fuelectenerg-402	98	18	10	10	NUM
fuelectenerg-402	98	19	s	s	NOUN
fuelectenerg-402	98	20	,	,	PUNCT
fuelectenerg-402	98	21	the	the	DET
fuelectenerg-402	98	22	time	time	NOUN
fuelectenerg-402	98	23	constant	constant	ADJ
fuelectenerg-402	98	24	of	of	ADP
fuelectenerg-402	98	25	the	the	DET
fuelectenerg-402	98	26	whole	whole	ADJ
fuelectenerg-402	98	27	sensor	sensor	NOUN
fuelectenerg-402	98	28	is	be	AUX
fuelectenerg-402	98	29	predominantly	predominantly	ADV
fuelectenerg-402	98	30	determined	determine	VERB
fuelectenerg-402	98	31	by	by	ADP
fuelectenerg-402	98	32	other	other	ADJ
fuelectenerg-402	98	33	sensor	sensor	NOUN
fuelectenerg-402	98	34	elements	element	NOUN
fuelectenerg-402	98	35	,	,	PUNCT
fuelectenerg-402	98	36	especially	especially	ADV
fuelectenerg-402	98	37	the	the	DET
fuelectenerg-402	98	38	sensor	sensor	NOUN
fuelectenerg-402	98	39	body	body	NOUN
fuelectenerg-402	98	40	.	.	PUNCT
fuelectenerg-402	99	1	furthermore	furthermore	ADV
fuelectenerg-402	99	2	,	,	PUNCT
fuelectenerg-402	99	3	dynamic	dynamic	ADJ
fuelectenerg-402	99	4	properties	property	NOUN
fuelectenerg-402	99	5	of	of	ADP
fuelectenerg-402	99	6	all	all	DET
fuelectenerg-402	99	7	contact	contact	NOUN
fuelectenerg-402	99	8	temperature	temperature	NOUN
fuelectenerg-402	99	9	measurements	measurement	NOUN
fuelectenerg-402	99	10	inevitably	inevitably	ADV
fuelectenerg-402	99	11	depend	depend	VERB
fuelectenerg-402	99	12	on	on	ADP
fuelectenerg-402	99	13	parameters	parameter	NOUN
fuelectenerg-402	99	14	and	and	CCONJ
fuelectenerg-402	99	15	conditions	condition	NOUN
fuelectenerg-402	99	16	external	external	ADJ
fuelectenerg-402	99	17	to	to	ADP
fuelectenerg-402	99	18	the	the	DET
fuelectenerg-402	99	19	sensor	sensor	NOUN
fuelectenerg-402	99	20	,	,	PUNCT
fuelectenerg-402	99	21	which	which	PRON
fuelectenerg-402	99	22	contribute	contribute	VERB
fuelectenerg-402	99	23	to	to	ADP
fuelectenerg-402	99	24	the	the	DET
fuelectenerg-402	99	25	overall	overall	ADJ
fuelectenerg-402	99	26	thermal	thermal	ADJ
fuelectenerg-402	99	27	inertia	inertia	NOUN
fuelectenerg-402	99	28	of	of	ADP
fuelectenerg-402	99	29	the	the	DET
fuelectenerg-402	99	30	system	system	NOUN
fuelectenerg-402	99	31	.	.	PUNCT
fuelectenerg-402	100	1	many	many	ADJ
fuelectenerg-402	100	2	industrial	industrial	ADJ
fuelectenerg-402	100	3	processes	process	NOUN
fuelectenerg-402	100	4	involve	involve	VERB
fuelectenerg-402	100	5	large	large	ADJ
fuelectenerg-402	100	6	amounts	amount	NOUN
fuelectenerg-402	100	7	of	of	ADP
fuelectenerg-402	100	8	fluids	fluid	NOUN
fuelectenerg-402	100	9	and/or	and/or	CCONJ
fuelectenerg-402	100	10	large	large	ADJ
fuelectenerg-402	100	11	metallic	metallic	ADJ
fuelectenerg-402	100	12	objects	object	NOUN
fuelectenerg-402	100	13	whose	whose	DET
fuelectenerg-402	100	14	heat	heat	NOUN
fuelectenerg-402	100	15	capacity	capacity	NOUN
fuelectenerg-402	100	16	causes	cause	VERB
fuelectenerg-402	100	17	the	the	DET
fuelectenerg-402	100	18	thermal	thermal	ADJ
fuelectenerg-402	100	19	response	response	NOUN
fuelectenerg-402	100	20	time	time	NOUN
fuelectenerg-402	100	21	of	of	ADP
fuelectenerg-402	100	22	the	the	DET
fuelectenerg-402	100	23	system	system	NOUN
fuelectenerg-402	100	24	to	to	PART
fuelectenerg-402	100	25	be	be	AUX
fuelectenerg-402	100	26	much	much	ADV
fuelectenerg-402	100	27	greater	great	ADJ
fuelectenerg-402	100	28	than	than	ADP
fuelectenerg-402	100	29	that	that	PRON
fuelectenerg-402	100	30	of	of	ADP
fuelectenerg-402	100	31	a	a	DET
fuelectenerg-402	100	32	typical	typical	ADJ
fuelectenerg-402	100	33	industrial	industrial	ADJ
fuelectenerg-402	100	34	pressure	pressure	NOUN
fuelectenerg-402	100	35	sensor	sensor	NOUN
fuelectenerg-402	100	36	.	.	PUNCT
fuelectenerg-402	101	1	some	some	DET
fuelectenerg-402	101	2	preliminary	preliminary	ADJ
fuelectenerg-402	101	3	results	result	NOUN
fuelectenerg-402	101	4	indicate	indicate	VERB
fuelectenerg-402	101	5	that	that	SCONJ
fuelectenerg-402	101	6	the	the	DET
fuelectenerg-402	101	7	thermal	thermal	ADJ
fuelectenerg-402	101	8	time	time	NOUN
fuelectenerg-402	101	9	constant	constant	ADJ
fuelectenerg-402	101	10	of	of	ADP
fuelectenerg-402	101	11	the	the	DET
fuelectenerg-402	101	12	described	describe	VERB
fuelectenerg-402	101	13	industrial	industrial	ADJ
fuelectenerg-402	101	14	pressure	pressure	NOUN
fuelectenerg-402	101	15	sensor	sensor	NOUN
fuelectenerg-402	101	16	is	be	AUX
fuelectenerg-402	101	17	approximately	approximately	ADV
fuelectenerg-402	101	18	400	400	NUM
fuelectenerg-402	101	19	s	s	NOUN
fuelectenerg-402	101	20	in	in	ADP
fuelectenerg-402	101	21	still	still	ADV
fuelectenerg-402	101	22	air	air	NOUN
fuelectenerg-402	101	23	,	,	PUNCT
fuelectenerg-402	101	24	which	which	PRON
fuelectenerg-402	101	25	will	will	AUX
fuelectenerg-402	101	26	be	be	AUX
fuelectenerg-402	101	27	further	far	ADV
fuelectenerg-402	101	28	investigated	investigate	VERB
fuelectenerg-402	101	29	in	in	ADP
fuelectenerg-402	101	30	our	our	PRON
fuelectenerg-402	101	31	future	future	ADJ
fuelectenerg-402	101	32	work	work	NOUN
fuelectenerg-402	101	33	.	.	PUNCT
fuelectenerg-402	102	1	130	130	NUM
fuelectenerg-402	102	2	m.	m.	NOUN
fuelectenerg-402	102	3	frantlović	frantlović	NOUN
fuelectenerg-402	102	4	,	,	PUNCT
fuelectenerg-402	102	5	i.	i.	PROPN
fuelectenerg-402	102	6	jokić	jokić	PROPN
fuelectenerg-402	102	7	,	,	PUNCT
fuelectenerg-402	102	8	ž	ž	PROPN
fuelectenerg-402	102	9	.	.	PUNCT
fuelectenerg-402	102	10	lazić	lazić	PROPN
fuelectenerg-402	102	11	,	,	PUNCT
fuelectenerg-402	102	12	et	et	PROPN
fuelectenerg-402	102	13	al	al	PROPN
fuelectenerg-402	102	14	.	.	PROPN
fuelectenerg-402	102	15	fig	fig	PROPN
fuelectenerg-402	102	16	.	.	PUNCT
fuelectenerg-402	103	1	7	7	NUM
fuelectenerg-402	103	2	temperature	temperature	NOUN
fuelectenerg-402	103	3	measurement	measurement	NOUN
fuelectenerg-402	103	4	error	error	NOUN
fuelectenerg-402	103	5	δт	δт	NOUN
fuelectenerg-402	103	6	as	as	ADP
fuelectenerg-402	103	7	a	a	DET
fuelectenerg-402	103	8	function	function	NOUN
fuelectenerg-402	103	9	of	of	ADP
fuelectenerg-402	103	10	temperature	temperature	NOUN
fuelectenerg-402	103	11	т	т	PROPN
fuelectenerg-402	103	12	for	for	ADP
fuelectenerg-402	103	13	three	three	NUM
fuelectenerg-402	103	14	tested	test	VERB
fuelectenerg-402	103	15	sensors	sensor	NOUN
fuelectenerg-402	103	16	,	,	PUNCT
fuelectenerg-402	103	17	with	with	ADP
fuelectenerg-402	103	18	sensor	sensor	NOUN
fuelectenerg-402	103	19	correction	correction	NOUN
fuelectenerg-402	103	20	4	4	NUM
fuelectenerg-402	103	21	.	.	PUNCT
fuelectenerg-402	103	22	conclusion	conclusion	NOUN
fuelectenerg-402	103	23	in	in	ADP
fuelectenerg-402	103	24	this	this	DET
fuelectenerg-402	103	25	paper	paper	NOUN
fuelectenerg-402	103	26	we	we	PRON
fuelectenerg-402	103	27	presented	present	VERB
fuelectenerg-402	103	28	a	a	DET
fuelectenerg-402	103	29	method	method	NOUN
fuelectenerg-402	103	30	for	for	ADP
fuelectenerg-402	103	31	temperature	temperature	NOUN
fuelectenerg-402	103	32	measurement	measurement	NOUN
fuelectenerg-402	103	33	using	use	VERB
fuelectenerg-402	103	34	mems	mem	NOUN
fuelectenerg-402	103	35	piezoresistive	piezoresistive	ADJ
fuelectenerg-402	103	36	pressure	pressure	NOUN
fuelectenerg-402	103	37	sensors	sensor	NOUN
fuelectenerg-402	103	38	.	.	PUNCT
fuelectenerg-402	104	1	three	three	NUM
fuelectenerg-402	104	2	such	such	ADJ
fuelectenerg-402	104	3	sensors	sensor	NOUN
fuelectenerg-402	104	4	made	make	VERB
fuelectenerg-402	104	5	by	by	ADP
fuelectenerg-402	104	6	cmt	cmt	PROPN
fuelectenerg-402	104	7	were	be	AUX
fuelectenerg-402	104	8	tested	test	VERB
fuelectenerg-402	104	9	and	and	CCONJ
fuelectenerg-402	104	10	characterized	characterize	VERB
fuelectenerg-402	104	11	for	for	ADP
fuelectenerg-402	104	12	temperature	temperature	NOUN
fuelectenerg-402	104	13	measurement	measurement	NOUN
fuelectenerg-402	104	14	.	.	PUNCT
fuelectenerg-402	105	1	the	the	DET
fuelectenerg-402	105	2	measurement	measurement	NOUN
fuelectenerg-402	105	3	error	error	NOUN
fuelectenerg-402	105	4	,	,	PUNCT
fuelectenerg-402	105	5	which	which	PRON
fuelectenerg-402	105	6	was	be	AUX
fuelectenerg-402	105	7	within	within	ADP
fuelectenerg-402	105	8	±	±	NUM
fuelectenerg-402	105	9	0.3	0.3	NUM
fuelectenerg-402	105	10	°	°	SYM
fuelectenerg-402	105	11	c	c	NOUN
fuelectenerg-402	105	12	in	in	ADP
fuelectenerg-402	105	13	the	the	DET
fuelectenerg-402	105	14	observed	observe	VERB
fuelectenerg-402	105	15	temperature	temperature	NOUN
fuelectenerg-402	105	16	range	range	NOUN
fuelectenerg-402	105	17	(	(	PUNCT
fuelectenerg-402	105	18	from	from	ADP
fuelectenerg-402	105	19	-20	-20	NUM
fuelectenerg-402	105	20	°	°	NUM
fuelectenerg-402	105	21	c	c	NOUN
fuelectenerg-402	105	22	to	to	ADP
fuelectenerg-402	105	23	70	70	NUM
fuelectenerg-402	105	24	°	°	NOUN
fuelectenerg-402	105	25	c	c	NOUN
fuelectenerg-402	105	26	)	)	PUNCT
fuelectenerg-402	105	27	,	,	PUNCT
fuelectenerg-402	105	28	can	can	AUX
fuelectenerg-402	105	29	be	be	AUX
fuelectenerg-402	105	30	considered	consider	VERB
fuelectenerg-402	105	31	as	as	ADP
fuelectenerg-402	105	32	a	a	DET
fuelectenerg-402	105	33	good	good	ADJ
fuelectenerg-402	105	34	result	result	NOUN
fuelectenerg-402	105	35	,	,	PUNCT
fuelectenerg-402	105	36	knowing	know	VERB
fuelectenerg-402	105	37	that	that	SCONJ
fuelectenerg-402	105	38	many	many	ADJ
fuelectenerg-402	105	39	dedicated	dedicated	ADJ
fuelectenerg-402	105	40	semiconductor	semiconductor	NOUN
fuelectenerg-402	105	41	-	-	PUNCT
fuelectenerg-402	105	42	based	base	VERB
fuelectenerg-402	105	43	temperature	temperature	NOUN
fuelectenerg-402	105	44	sensors	sensor	NOUN
fuelectenerg-402	105	45	,	,	PUNCT
fuelectenerg-402	105	46	as	as	ADV
fuelectenerg-402	105	47	well	well	ADV
fuelectenerg-402	105	48	as	as	ADP
fuelectenerg-402	105	49	thermocouples	thermocouple	NOUN
fuelectenerg-402	105	50	,	,	PUNCT
fuelectenerg-402	105	51	exhibit	exhibit	VERB
fuelectenerg-402	105	52	greater	great	ADJ
fuelectenerg-402	105	53	measurement	measurement	NOUN
fuelectenerg-402	105	54	errors	error	NOUN
fuelectenerg-402	105	55	.	.	PUNCT
fuelectenerg-402	106	1	the	the	DET
fuelectenerg-402	106	2	use	use	NOUN
fuelectenerg-402	106	3	of	of	ADP
fuelectenerg-402	106	4	piezoresistive	piezoresistive	ADJ
fuelectenerg-402	106	5	pressure	pressure	NOUN
fuelectenerg-402	106	6	sensors	sensor	NOUN
fuelectenerg-402	106	7	instead	instead	ADV
fuelectenerg-402	106	8	of	of	ADP
fuelectenerg-402	106	9	dedicated	dedicated	ADJ
fuelectenerg-402	106	10	temperature	temperature	NOUN
fuelectenerg-402	106	11	sensors	sensor	NOUN
fuelectenerg-402	106	12	for	for	ADP
fuelectenerg-402	106	13	temperature	temperature	NOUN
fuelectenerg-402	106	14	measurements	measurement	NOUN
fuelectenerg-402	106	15	has	have	VERB
fuelectenerg-402	106	16	some	some	DET
fuelectenerg-402	106	17	disadvantages	disadvantage	NOUN
fuelectenerg-402	106	18	and	and	CCONJ
fuelectenerg-402	106	19	limitations	limitation	NOUN
fuelectenerg-402	106	20	.	.	PUNCT
fuelectenerg-402	107	1	being	be	AUX
fuelectenerg-402	107	2	a	a	DET
fuelectenerg-402	107	3	silicon	silicon	NOUN
fuelectenerg-402	107	4	-	-	PUNCT
fuelectenerg-402	107	5	based	base	VERB
fuelectenerg-402	107	6	semiconductor	semiconductor	NOUN
fuelectenerg-402	107	7	device	device	NOUN
fuelectenerg-402	107	8	,	,	PUNCT
fuelectenerg-402	107	9	the	the	DET
fuelectenerg-402	107	10	pressure	pressure	NOUN
fuelectenerg-402	107	11	sensing	sense	VERB
fuelectenerg-402	107	12	element	element	NOUN
fuelectenerg-402	107	13	has	have	VERB
fuelectenerg-402	107	14	a	a	DET
fuelectenerg-402	107	15	very	very	ADV
fuelectenerg-402	107	16	limited	limited	ADJ
fuelectenerg-402	107	17	temperature	temperature	NOUN
fuelectenerg-402	107	18	range	range	NOUN
fuelectenerg-402	107	19	(	(	PUNCT
fuelectenerg-402	107	20	less	less	ADJ
fuelectenerg-402	107	21	than	than	ADP
fuelectenerg-402	107	22	130	130	NUM
fuelectenerg-402	107	23	°	°	NOUN
fuelectenerg-402	107	24	c	c	NOUN
fuelectenerg-402	107	25	)	)	PUNCT
fuelectenerg-402	107	26	compared	compare	VERB
fuelectenerg-402	107	27	to	to	ADP
fuelectenerg-402	107	28	some	some	DET
fuelectenerg-402	107	29	dedicated	dedicated	ADJ
fuelectenerg-402	107	30	temperature	temperature	NOUN
fuelectenerg-402	107	31	sensors	sensor	NOUN
fuelectenerg-402	107	32	such	such	ADJ
fuelectenerg-402	107	33	as	as	ADP
fuelectenerg-402	107	34	platinum	platinum	NOUN
fuelectenerg-402	107	35	resistance	resistance	NOUN
fuelectenerg-402	107	36	thermometers	thermometer	NOUN
fuelectenerg-402	107	37	,	,	PUNCT
fuelectenerg-402	107	38	and	and	CCONJ
fuelectenerg-402	107	39	especially	especially	ADV
fuelectenerg-402	107	40	thermocouples	thermocouple	NOUN
fuelectenerg-402	107	41	.	.	PUNCT
fuelectenerg-402	108	1	another	another	DET
fuelectenerg-402	108	2	limitation	limitation	NOUN
fuelectenerg-402	108	3	is	be	AUX
fuelectenerg-402	108	4	the	the	DET
fuelectenerg-402	108	5	thermal	thermal	ADJ
fuelectenerg-402	108	6	response	response	NOUN
fuelectenerg-402	108	7	time	time	NOUN
fuelectenerg-402	108	8	of	of	ADP
fuelectenerg-402	108	9	a	a	DET
fuelectenerg-402	108	10	typical	typical	ADJ
fuelectenerg-402	108	11	industrial	industrial	ADJ
fuelectenerg-402	108	12	-	-	PUNCT
fuelectenerg-402	108	13	grade	grade	NOUN
fuelectenerg-402	108	14	pressure	pressure	NOUN
fuelectenerg-402	108	15	sensor	sensor	NOUN
fuelectenerg-402	108	16	.	.	PUNCT
fuelectenerg-402	109	1	in	in	ADP
fuelectenerg-402	109	2	spite	spite	NOUN
fuelectenerg-402	109	3	of	of	ADP
fuelectenerg-402	109	4	these	these	DET
fuelectenerg-402	109	5	limitations	limitation	NOUN
fuelectenerg-402	109	6	,	,	PUNCT
fuelectenerg-402	109	7	many	many	ADJ
fuelectenerg-402	109	8	applications	application	NOUN
fuelectenerg-402	109	9	exist	exist	VERB
fuelectenerg-402	109	10	where	where	SCONJ
fuelectenerg-402	109	11	the	the	DET
fuelectenerg-402	109	12	described	describe	VERB
fuelectenerg-402	109	13	temperature	temperature	NOUN
fuelectenerg-402	109	14	measurement	measurement	NOUN
fuelectenerg-402	109	15	method	method	NOUN
fuelectenerg-402	109	16	can	can	AUX
fuelectenerg-402	109	17	be	be	AUX
fuelectenerg-402	109	18	useful	useful	ADJ
fuelectenerg-402	109	19	.	.	PUNCT
fuelectenerg-402	110	1	some	some	DET
fuelectenerg-402	110	2	interesting	interesting	ADJ
fuelectenerg-402	110	3	new	new	ADJ
fuelectenerg-402	110	4	applications	application	NOUN
fuelectenerg-402	110	5	are	be	AUX
fuelectenerg-402	110	6	possible	possible	ADJ
fuelectenerg-402	110	7	.	.	PUNCT
fuelectenerg-402	111	1	for	for	ADP
fuelectenerg-402	111	2	example	example	NOUN
fuelectenerg-402	111	3	,	,	PUNCT
fuelectenerg-402	111	4	in	in	ADP
fuelectenerg-402	111	5	industrial	industrial	ADJ
fuelectenerg-402	111	6	processes	process	NOUN
fuelectenerg-402	111	7	with	with	ADP
fuelectenerg-402	111	8	many	many	ADJ
fuelectenerg-402	111	9	pressure	pressure	NOUN
fuelectenerg-402	111	10	sensors	sensor	NOUN
fuelectenerg-402	111	11	installed	instal	VERB
fuelectenerg-402	111	12	there	there	PRON
fuelectenerg-402	111	13	is	be	VERB
fuelectenerg-402	111	14	often	often	ADV
fuelectenerg-402	111	15	a	a	DET
fuelectenerg-402	111	16	need	need	NOUN
fuelectenerg-402	111	17	for	for	ADP
fuelectenerg-402	111	18	an	an	DET
fuelectenerg-402	111	19	additional	additional	ADJ
fuelectenerg-402	111	20	temperature	temperature	NOUN
fuelectenerg-402	111	21	measurement	measurement	NOUN
fuelectenerg-402	111	22	.	.	PUNCT
fuelectenerg-402	112	1	the	the	DET
fuelectenerg-402	112	2	presented	present	VERB
fuelectenerg-402	112	3	method	method	NOUN
fuelectenerg-402	112	4	enables	enable	VERB
fuelectenerg-402	112	5	a	a	DET
fuelectenerg-402	112	6	simple	simple	ADJ
fuelectenerg-402	112	7	on	on	ADP
fuelectenerg-402	112	8	-	-	PUNCT
fuelectenerg-402	112	9	site	site	NOUN
fuelectenerg-402	112	10	conversion	conversion	NOUN
fuelectenerg-402	112	11	of	of	ADP
fuelectenerg-402	112	12	a	a	DET
fuelectenerg-402	112	13	pressure	pressure	NOUN
fuelectenerg-402	112	14	transmitter	transmitter	NOUN
fuelectenerg-402	112	15	into	into	ADP
fuelectenerg-402	112	16	a	a	DET
fuelectenerg-402	112	17	temperature	temperature	NOUN
fuelectenerg-402	112	18	transmitter	transmitter	NOUN
fuelectenerg-402	112	19	,	,	PUNCT
fuelectenerg-402	112	20	as	as	ADV
fuelectenerg-402	112	21	well	well	ADV
fuelectenerg-402	112	22	as	as	ADP
fuelectenerg-402	112	23	sensor	sensor	NOUN
fuelectenerg-402	112	24	validation	validation	NOUN
fuelectenerg-402	112	25	and	and	CCONJ
fuelectenerg-402	112	26	various	various	ADJ
fuelectenerg-402	112	27	multisensor	multisensor	NOUN
fuelectenerg-402	112	28	configurations	configuration	NOUN
fuelectenerg-402	112	29	.	.	PUNCT
fuelectenerg-402	113	1	in	in	ADP
fuelectenerg-402	113	2	our	our	PRON
fuelectenerg-402	113	3	future	future	ADJ
fuelectenerg-402	113	4	work	work	NOUN
fuelectenerg-402	113	5	in	in	ADP
fuelectenerg-402	113	6	this	this	DET
fuelectenerg-402	113	7	research	research	NOUN
fuelectenerg-402	113	8	field	field	NOUN
fuelectenerg-402	113	9	we	we	PRON
fuelectenerg-402	113	10	intend	intend	VERB
fuelectenerg-402	113	11	to	to	PART
fuelectenerg-402	113	12	improve	improve	VERB
fuelectenerg-402	113	13	the	the	DET
fuelectenerg-402	113	14	sensor	sensor	NOUN
fuelectenerg-402	113	15	measurement	measurement	NOUN
fuelectenerg-402	113	16	performance	performance	NOUN
fuelectenerg-402	113	17	and	and	CCONJ
fuelectenerg-402	113	18	to	to	PART
fuelectenerg-402	113	19	overcome	overcome	VERB
fuelectenerg-402	113	20	the	the	DET
fuelectenerg-402	113	21	limitations	limitation	NOUN
fuelectenerg-402	113	22	by	by	ADP
fuelectenerg-402	113	23	using	use	VERB
fuelectenerg-402	113	24	more	more	ADV
fuelectenerg-402	113	25	advanced	advanced	ADJ
fuelectenerg-402	113	26	sensor	sensor	NOUN
fuelectenerg-402	113	27	designs	design	NOUN
fuelectenerg-402	113	28	,	,	PUNCT
fuelectenerg-402	113	29	materials	material	NOUN
fuelectenerg-402	113	30	and	and	CCONJ
fuelectenerg-402	113	31	fabrication	fabrication	NOUN
fuelectenerg-402	113	32	techniques	technique	NOUN
fuelectenerg-402	113	33	.	.	PUNCT
fuelectenerg-402	114	1	for	for	ADP
fuelectenerg-402	114	2	example	example	NOUN
fuelectenerg-402	114	3	,	,	PUNCT
fuelectenerg-402	114	4	the	the	DET
fuelectenerg-402	114	5	mentioned	mention	VERB
fuelectenerg-402	114	6	temperature	temperature	NOUN
fuelectenerg-402	114	7	range	range	NOUN
fuelectenerg-402	114	8	limitation	limitation	NOUN
fuelectenerg-402	114	9	can	can	AUX
fuelectenerg-402	114	10	be	be	AUX
fuelectenerg-402	114	11	overcome	overcome	VERB
fuelectenerg-402	114	12	by	by	ADP
fuelectenerg-402	114	13	fabricating	fabricate	VERB
fuelectenerg-402	114	14	sensing	sense	VERB
fuelectenerg-402	114	15	elements	element	NOUN
fuelectenerg-402	114	16	on	on	ADP
fuelectenerg-402	114	17	soi	soi	ADJ
fuelectenerg-402	114	18	(	(	PUNCT
fuelectenerg-402	114	19	silicon	silicon	NOUN
fuelectenerg-402	114	20	-	-	PUNCT
fuelectenerg-402	114	21	on	on	ADP
fuelectenerg-402	114	22	-	-	PUNCT
fuelectenerg-402	114	23	insulator	insulator	NOUN
fuelectenerg-402	114	24	)	)	PUNCT
fuelectenerg-402	114	25	substrates	substrate	NOUN
fuelectenerg-402	114	26	[	[	PUNCT
fuelectenerg-402	114	27	13	13	NUM
fuelectenerg-402	114	28	]	]	PUNCT
fuelectenerg-402	114	29	.	.	PUNCT
fuelectenerg-402	115	1	combined	combine	VERB
fuelectenerg-402	115	2	pressure	pressure	NOUN
fuelectenerg-402	115	3	and	and	CCONJ
fuelectenerg-402	115	4	temperature	temperature	NOUN
fuelectenerg-402	115	5	influences	influence	NOUN
fuelectenerg-402	115	6	as	as	ADV
fuelectenerg-402	115	7	well	well	ADV
fuelectenerg-402	115	8	as	as	ADP
fuelectenerg-402	115	9	dynamic	dynamic	ADJ
fuelectenerg-402	115	10	properties	property	NOUN
fuelectenerg-402	115	11	of	of	ADP
fuelectenerg-402	115	12	the	the	DET
fuelectenerg-402	115	13	sensors	sensor	NOUN
fuelectenerg-402	115	14	will	will	AUX
fuelectenerg-402	115	15	be	be	AUX
fuelectenerg-402	115	16	investigated	investigate	VERB
fuelectenerg-402	115	17	.	.	PUNCT
fuelectenerg-402	116	1	the	the	DET
fuelectenerg-402	116	2	development	development	NOUN
fuelectenerg-402	116	3	of	of	ADP
fuelectenerg-402	116	4	sensor	sensor	NOUN
fuelectenerg-402	116	5	correction	correction	NOUN
fuelectenerg-402	116	6	methods	method	NOUN
fuelectenerg-402	116	7	will	will	AUX
fuelectenerg-402	116	8	be	be	AUX
fuelectenerg-402	116	9	continued	continue	VERB
fuelectenerg-402	116	10	and	and	CCONJ
fuelectenerg-402	116	11	expanded	expand	VERB
fuelectenerg-402	116	12	to	to	ADP
fuelectenerg-402	116	13	other	other	ADJ
fuelectenerg-402	116	14	types	type	NOUN
fuelectenerg-402	116	15	of	of	ADP
fuelectenerg-402	116	16	mems	mems	ADJ
fuelectenerg-402	116	17	sensors	sensor	NOUN
fuelectenerg-402	116	18	.	.	PUNCT
fuelectenerg-402	117	1	temperature	temperature	NOUN
fuelectenerg-402	117	2	measurement	measurement	NOUN
fuelectenerg-402	117	3	performance	performance	NOUN
fuelectenerg-402	117	4	of	of	ADP
fuelectenerg-402	117	5	silicon	silicon	NOUN
fuelectenerg-402	117	6	piezoresistive	piezoresistive	ADJ
fuelectenerg-402	117	7	mems	mem	NOUN
fuelectenerg-402	117	8	pressure	pressure	NOUN
fuelectenerg-402	117	9	sensors	sensor	NOUN
fuelectenerg-402	117	10	...	...	PUNCT
fuelectenerg-402	118	1	131	131	NUM
fuelectenerg-402	118	2	acknowledgement	acknowledgement	NOUN
fuelectenerg-402	118	3	:	:	PUNCT
fuelectenerg-402	118	4	this	this	DET
fuelectenerg-402	118	5	paper	paper	NOUN
fuelectenerg-402	118	6	is	be	AUX
fuelectenerg-402	118	7	a	a	DET
fuelectenerg-402	118	8	result	result	NOUN
fuelectenerg-402	118	9	of	of	ADP
fuelectenerg-402	118	10	the	the	DET
fuelectenerg-402	118	11	research	research	NOUN
fuelectenerg-402	118	12	performed	perform	VERB
fuelectenerg-402	118	13	within	within	ADP
fuelectenerg-402	118	14	the	the	DET
fuelectenerg-402	118	15	project	project	NOUN
fuelectenerg-402	118	16	tr-32008	tr-32008	NOUN
fuelectenerg-402	118	17	funded	fund	VERB
fuelectenerg-402	118	18	by	by	ADP
fuelectenerg-402	118	19	the	the	DET
fuelectenerg-402	118	20	serbian	serbian	PROPN
fuelectenerg-402	118	21	ministry	ministry	PROPN
fuelectenerg-402	118	22	of	of	ADP
fuelectenerg-402	118	23	education	education	PROPN
fuelectenerg-402	118	24	,	,	PUNCT
fuelectenerg-402	118	25	science	science	NOUN
fuelectenerg-402	118	26	and	and	CCONJ
fuelectenerg-402	118	27	technological	technological	ADJ
fuelectenerg-402	118	28	development	development	NOUN
fuelectenerg-402	118	29	.	.	PUNCT
fuelectenerg-402	119	1	references	reference	NOUN
fuelectenerg-402	119	2	[	[	X
fuelectenerg-402	119	3	1	1	NUM
fuelectenerg-402	119	4	]	]	PUNCT
fuelectenerg-402	119	5	m.	m.	NOUN
fuelectenerg-402	119	6	frantlović	frantlović	NOUN
fuelectenerg-402	119	7	,	,	PUNCT
fuelectenerg-402	119	8	i.	i.	PROPN
fuelectenerg-402	119	9	jokić	jokić	PROPN
fuelectenerg-402	119	10	,	,	PUNCT
fuelectenerg-402	119	11	ž	ž	PROPN
fuelectenerg-402	119	12	.	.	PUNCT
fuelectenerg-402	119	13	lazić	lazić	PROPN
fuelectenerg-402	119	14	,	,	PUNCT
fuelectenerg-402	119	15	b.	b.	PROPN
fuelectenerg-402	119	16	vukelić	vukelić	PROPN
fuelectenerg-402	119	17	,	,	PUNCT
fuelectenerg-402	119	18	m.	m.	NOUN
fuelectenerg-402	119	19	obradov	obradov	PROPN
fuelectenerg-402	119	20	,	,	PUNCT
fuelectenerg-402	119	21	d.	d.	PROPN
fuelectenerg-402	119	22	vasiljević	vasiljević	PROPN
fuelectenerg-402	119	23	-	-	PUNCT
fuelectenerg-402	119	24	radović	radović	PROPN
fuelectenerg-402	119	25	,	,	PUNCT
fuelectenerg-402	119	26	s.	s.	PROPN
fuelectenerg-402	119	27	stanković	stanković	PROPN
fuelectenerg-402	119	28	,	,	PUNCT
fuelectenerg-402	119	29	"	"	PUNCT
fuelectenerg-402	119	30	temperature	temperature	NOUN
fuelectenerg-402	119	31	measurement	measurement	NOUN
fuelectenerg-402	119	32	using	use	VERB
fuelectenerg-402	119	33	silicon	silicon	NOUN
fuelectenerg-402	119	34	piezoresistive	piezoresistive	ADJ
fuelectenerg-402	119	35	mems	mem	NOUN
fuelectenerg-402	119	36	pressure	pressure	NOUN
fuelectenerg-402	119	37	sensors	sensor	NOUN
fuelectenerg-402	119	38	"	"	PUNCT
fuelectenerg-402	119	39	,	,	PUNCT
fuelectenerg-402	119	40	in	in	ADP
fuelectenerg-402	119	41	proc	proc	NOUN
fuelectenerg-402	119	42	.	.	PUNCT
fuelectenerg-402	120	1	29th	29th	ADJ
fuelectenerg-402	120	2	international	international	ADJ
fuelectenerg-402	120	3	conference	conference	NOUN
fuelectenerg-402	120	4	on	on	ADP
fuelectenerg-402	120	5	microelectronics	microelectronic	NOUN
fuelectenerg-402	120	6	miel	miel	PROPN
fuelectenerg-402	120	7	2014	2014	NUM
fuelectenerg-402	120	8	,	,	PUNCT
fuelectenerg-402	120	9	2014	2014	NUM
fuelectenerg-402	120	10	,	,	PUNCT
fuelectenerg-402	120	11	pp	pp	ADJ
fuelectenerg-402	120	12	.	.	PUNCT
fuelectenerg-402	121	1	159	159	NUM
fuelectenerg-402	121	2	161	161	NUM
fuelectenerg-402	121	3	(	(	PUNCT
fuelectenerg-402	121	4	doi	doi	NOUN
fuelectenerg-402	121	5	:	:	PUNCT
fuelectenerg-402	121	6	10.1109	10.1109	NUM
fuelectenerg-402	121	7	/	/	SYM
fuelectenerg-402	121	8	miel.2014.6842110	miel.2014.6842110	ADJ
fuelectenerg-402	121	9	)	)	PUNCT
fuelectenerg-402	121	10	.	.	PUNCT
fuelectenerg-402	122	1	[	[	X
fuelectenerg-402	122	2	2	2	NUM
fuelectenerg-402	122	3	]	]	PUNCT
fuelectenerg-402	122	4	z.	z.	PROPN
fuelectenerg-402	122	5	djurić	djurić	PROPN
fuelectenerg-402	122	6	,	,	PUNCT
fuelectenerg-402	122	7	j.	j.	PROPN
fuelectenerg-402	122	8	matović	matović	PROPN
fuelectenerg-402	122	9	,	,	PUNCT
fuelectenerg-402	122	10	m.	m.	NOUN
fuelectenerg-402	122	11	matić	matić	PROPN
fuelectenerg-402	122	12	,	,	PUNCT
fuelectenerg-402	122	13	n.	n.	PROPN
fuelectenerg-402	122	14	mišović	mišović	PROPN
fuelectenerg-402	122	15	(	(	PUNCT
fuelectenerg-402	122	16	simičić	simičić	PROPN
fuelectenerg-402	122	17	)	)	PUNCT
fuelectenerg-402	122	18	,	,	PUNCT
fuelectenerg-402	122	19	r.	r.	PROPN
fuelectenerg-402	122	20	petrović	petrović	PROPN
fuelectenerg-402	122	21	,	,	PUNCT
fuelectenerg-402	122	22	m.	m.	NOUN
fuelectenerg-402	122	23	a.	a.	NOUN
fuelectenerg-402	122	24	smiljanić	smiljanić	PROPN
fuelectenerg-402	122	25	,	,	PUNCT
fuelectenerg-402	122	26	and	and	CCONJ
fuelectenerg-402	122	27	ž	ž	PROPN
fuelectenerg-402	122	28	.	.	PUNCT
fuelectenerg-402	122	29	lazić	lazić	PROPN
fuelectenerg-402	122	30	,	,	PUNCT
fuelectenerg-402	122	31	"	"	PUNCT
fuelectenerg-402	122	32	pressure	pressure	NOUN
fuelectenerg-402	122	33	sensor	sensor	NOUN
fuelectenerg-402	122	34	with	with	ADP
fuelectenerg-402	122	35	silicon	silicon	NOUN
fuelectenerg-402	122	36	diaphragm	diaphragm	PROPN
fuelectenerg-402	122	37	"	"	PUNCT
fuelectenerg-402	122	38	,	,	PUNCT
fuelectenerg-402	122	39	in	in	ADP
fuelectenerg-402	122	40	proc	proc	NOUN
fuelectenerg-402	122	41	.	.	PUNCT
fuelectenerg-402	123	1	xiv	xiv	PROPN
fuelectenerg-402	124	1	yugoslav	yugoslav	PROPN
fuelectenerg-402	124	2	conference	conference	PROPN
fuelectenerg-402	124	3	on	on	ADP
fuelectenerg-402	124	4	microelectronics	microelectronic	NOUN
fuelectenerg-402	124	5	miel	miel	PROPN
fuelectenerg-402	124	6	,	,	PUNCT
fuelectenerg-402	124	7	beograd	beograd	PROPN
fuelectenerg-402	124	8	,	,	PUNCT
fuelectenerg-402	124	9	1986	1986	NUM
fuelectenerg-402	124	10	,	,	PUNCT
fuelectenerg-402	124	11	pp	pp	ADJ
fuelectenerg-402	124	12	.	.	PUNCT
fuelectenerg-402	125	1	88	88	NUM
fuelectenerg-402	125	2	-	-	SYM
fuelectenerg-402	125	3	100	100	NUM
fuelectenerg-402	125	4	.	.	PUNCT
fuelectenerg-402	126	1	[	[	X
fuelectenerg-402	126	2	3	3	X
fuelectenerg-402	126	3	]	]	X
fuelectenerg-402	126	4	j.	j.	PROPN
fuelectenerg-402	126	5	matović	matović	PROPN
fuelectenerg-402	126	6	,	,	PUNCT
fuelectenerg-402	126	7	z.	z.	PROPN
fuelectenerg-402	126	8	djurić	djurić	PROPN
fuelectenerg-402	126	9	,	,	PUNCT
fuelectenerg-402	126	10	n.	n.	NOUN
fuelectenerg-402	126	11	simičić	simičić	NOUN
fuelectenerg-402	126	12	,	,	PUNCT
fuelectenerg-402	126	13	m.	m.	NOUN
fuelectenerg-402	126	14	matić	matić	NOUN
fuelectenerg-402	126	15	,	,	PUNCT
fuelectenerg-402	126	16	and	and	CCONJ
fuelectenerg-402	126	17	r.	r.	PROPN
fuelectenerg-402	126	18	petrović	petrović	NOUN
fuelectenerg-402	126	19	,	,	PUNCT
fuelectenerg-402	126	20	"	"	PUNCT
fuelectenerg-402	126	21	a	a	DET
fuelectenerg-402	126	22	nonlinear	nonlinear	ADJ
fuelectenerg-402	126	23	simulation	simulation	NOUN
fuelectenerg-402	126	24	of	of	ADP
fuelectenerg-402	126	25	pressure	pressure	NOUN
fuelectenerg-402	126	26	sensors	sensor	NOUN
fuelectenerg-402	126	27	"	"	PUNCT
fuelectenerg-402	126	28	,	,	PUNCT
fuelectenerg-402	126	29	in	in	ADP
fuelectenerg-402	126	30	proc	proc	NOUN
fuelectenerg-402	126	31	.	.	PUNCT
fuelectenerg-402	127	1	19th	19th	ADJ
fuelectenerg-402	127	2	yugoslav	yugoslav	ADJ
fuelectenerg-402	127	3	conference	conference	NOUN
fuelectenerg-402	127	4	on	on	ADP
fuelectenerg-402	127	5	microelectronics	microelectronic	NOUN
fuelectenerg-402	127	6	miel	miel	PROPN
fuelectenerg-402	127	7	'	'	NUM
fuelectenerg-402	127	8	91	91	NUM
fuelectenerg-402	127	9	,	,	PUNCT
fuelectenerg-402	127	10	beograd	beograd	NOUN
fuelectenerg-402	127	11	,	,	PUNCT
fuelectenerg-402	127	12	1991	1991	NUM
fuelectenerg-402	127	13	.	.	PUNCT
fuelectenerg-402	128	1	[	[	X
fuelectenerg-402	128	2	4	4	X
fuelectenerg-402	128	3	]	]	X
fuelectenerg-402	128	4	d.	d.	NOUN
fuelectenerg-402	128	5	tanasković	tanasković	PROPN
fuelectenerg-402	128	6	,	,	PUNCT
fuelectenerg-402	128	7	n.	n.	NOUN
fuelectenerg-402	128	8	simičić	simičić	PROPN
fuelectenerg-402	128	9	,	,	PUNCT
fuelectenerg-402	128	10	z.	z.	PROPN
fuelectenerg-402	128	11	djurić	djurić	PROPN
fuelectenerg-402	128	12	,	,	PUNCT
fuelectenerg-402	128	13	ž	ž	PROPN
fuelectenerg-402	128	14	.	.	PUNCT
fuelectenerg-402	128	15	lazić	lazić	PROPN
fuelectenerg-402	128	16	,	,	PUNCT
fuelectenerg-402	128	17	r.	r.	PROPN
fuelectenerg-402	128	18	petrović	petrović	PROPN
fuelectenerg-402	128	19	,	,	PUNCT
fuelectenerg-402	128	20	j.	j.	PROPN
fuelectenerg-402	128	21	matović	matović	PROPN
fuelectenerg-402	128	22	,	,	PUNCT
fuelectenerg-402	128	23	m.	m.	NOUN
fuelectenerg-402	128	24	popović	popović	NOUN
fuelectenerg-402	128	25	,	,	PUNCT
fuelectenerg-402	128	26	and	and	CCONJ
fuelectenerg-402	128	27	m.	m.	NOUN
fuelectenerg-402	128	28	matić	matić	NOUN
fuelectenerg-402	128	29	,	,	PUNCT
fuelectenerg-402	128	30	"	"	PUNCT
fuelectenerg-402	128	31	temperature	temperature	NOUN
fuelectenerg-402	128	32	characterics	characteric	NOUN
fuelectenerg-402	128	33	of	of	ADP
fuelectenerg-402	128	34	silicon	silicon	NOUN
fuelectenerg-402	128	35	pressure	pressure	NOUN
fuelectenerg-402	128	36	sensor	sensor	NOUN
fuelectenerg-402	128	37	:	:	PUNCT
fuelectenerg-402	128	38	the	the	DET
fuelectenerg-402	128	39	effect	effect	NOUN
fuelectenerg-402	128	40	of	of	ADP
fuelectenerg-402	128	41	impurity	impurity	NOUN
fuelectenerg-402	128	42	profile	profile	NOUN
fuelectenerg-402	128	43	variation	variation	NOUN
fuelectenerg-402	128	44	"	"	PUNCT
fuelectenerg-402	128	45	,	,	PUNCT
fuelectenerg-402	128	46	in	in	ADP
fuelectenerg-402	128	47	proc	proc	NOUN
fuelectenerg-402	128	48	.	.	PUNCT
fuelectenerg-402	129	1	2nd	2nd	ADJ
fuelectenerg-402	129	2	serbian	serbian	ADJ
fuelectenerg-402	129	3	conference	conference	NOUN
fuelectenerg-402	129	4	on	on	ADP
fuelectenerg-402	129	5	microelectronics	microelectronic	NOUN
fuelectenerg-402	129	6	and	and	CCONJ
fuelectenerg-402	129	7	optoelectronics	optoelectronic	NOUN
fuelectenerg-402	129	8	miopel	miopel	VERB
fuelectenerg-402	129	9	93	93	NUM
fuelectenerg-402	129	10	,	,	PUNCT
fuelectenerg-402	129	11	1993	1993	NUM
fuelectenerg-402	129	12	,	,	PUNCT
fuelectenerg-402	129	13	pp	pp	ADJ
fuelectenerg-402	129	14	.	.	PUNCT
fuelectenerg-402	130	1	297	297	NUM
fuelectenerg-402	130	2	-	-	SYM
fuelectenerg-402	130	3	302	302	NUM
fuelectenerg-402	130	4	.	.	PUNCT
fuelectenerg-402	131	1	[	[	X
fuelectenerg-402	131	2	5	5	X
fuelectenerg-402	131	3	]	]	PUNCT
fuelectenerg-402	131	4	z.	z.	PROPN
fuelectenerg-402	131	5	đurić	đurić	PROPN
fuelectenerg-402	131	6	,	,	PUNCT
fuelectenerg-402	131	7	"	"	PUNCT
fuelectenerg-402	131	8	rezultati	rezultati	NOUN
fuelectenerg-402	131	9	istraživanja	istraživanja	VERB
fuelectenerg-402	131	10	i	i	PRON
fuelectenerg-402	131	11	razvoja	razvoja	VERB
fuelectenerg-402	131	12	si	si	PROPN
fuelectenerg-402	131	13	senzora	senzora	PROPN
fuelectenerg-402	132	1	i	i	PRON
fuelectenerg-402	132	2	transmitera	transmitera	NOUN
fuelectenerg-402	132	3	pritiska	pritiska	ADJ
fuelectenerg-402	132	4	u	u	PROPN
fuelectenerg-402	132	5	ihtm	ihtm	VERB
fuelectenerg-402	132	6	–	–	PUNCT
fuelectenerg-402	132	7	centru	centru	PROPN
fuelectenerg-402	132	8	za	za	PROPN
fuelectenerg-402	132	9	mikroelektronske	mikroelektronske	ADJ
fuelectenerg-402	132	10	tehnologije	tehnologije	NOUN
fuelectenerg-402	132	11	i	i	PRON
fuelectenerg-402	132	12	monokristale	monokristale	VERB
fuelectenerg-402	132	13	"	"	PUNCT
fuelectenerg-402	132	14	,	,	PUNCT
fuelectenerg-402	132	15	in	in	ADP
fuelectenerg-402	132	16	proc	proc	NOUN
fuelectenerg-402	132	17	.	.	PUNCT
fuelectenerg-402	133	1	20th	20th	ADJ
fuelectenerg-402	133	2	international	international	ADJ
fuelectenerg-402	133	3	conference	conference	NOUN
fuelectenerg-402	133	4	on	on	ADP
fuelectenerg-402	133	5	microelectronics	microelectronic	NOUN
fuelectenerg-402	133	6	miel	miel	PROPN
fuelectenerg-402	133	7	,	,	PUNCT
fuelectenerg-402	133	8	1995	1995	NUM
fuelectenerg-402	133	9	(	(	PUNCT
fuelectenerg-402	133	10	serbian	serbian	ADJ
fuelectenerg-402	133	11	)	)	PUNCT
fuelectenerg-402	133	12	.	.	PUNCT
fuelectenerg-402	134	1	[	[	X
fuelectenerg-402	134	2	6	6	NUM
fuelectenerg-402	134	3	]	]	PUNCT
fuelectenerg-402	134	4	m.	m.	NOUN
fuelectenerg-402	134	5	m.	m.	NOUN
fuelectenerg-402	134	6	smiljanić	smiljanić	PROPN
fuelectenerg-402	134	7	,	,	PUNCT
fuelectenerg-402	134	8	z.	z.	PROPN
fuelectenerg-402	134	9	djurić	djurić	PROPN
fuelectenerg-402	134	10	,	,	PUNCT
fuelectenerg-402	134	11	ž	ž	PROPN
fuelectenerg-402	134	12	.	.	PUNCT
fuelectenerg-402	134	13	lazić	lazić	PROPN
fuelectenerg-402	134	14	,	,	PUNCT
fuelectenerg-402	134	15	m.	m.	NOUN
fuelectenerg-402	134	16	popović	popović	NOUN
fuelectenerg-402	134	17	,	,	PUNCT
fuelectenerg-402	134	18	and	and	CCONJ
fuelectenerg-402	134	19	k.	k.	PROPN
fuelectenerg-402	134	20	radulović	radulović	PROPN
fuelectenerg-402	134	21	,	,	PUNCT
fuelectenerg-402	134	22	"	"	PUNCT
fuelectenerg-402	134	23	piezootporni	piezootporni	NOUN
fuelectenerg-402	134	24	senzori	senzori	X
fuelectenerg-402	134	25	pritiska	pritiska	PROPN
fuelectenerg-402	134	26	na	na	ADP
fuelectenerg-402	134	27	soi	soi	ADJ
fuelectenerg-402	134	28	pločicama	pločicama	NOUN
fuelectenerg-402	134	29	namenjeni	namenjeni	NOUN
fuelectenerg-402	134	30	funkcionisanju	funkcionisanju	VERB
fuelectenerg-402	134	31	na	na	ADP
fuelectenerg-402	134	32	visokim	visokim	PROPN
fuelectenerg-402	134	33	temperaturama	temperaturama	PROPN
fuelectenerg-402	134	34	"	"	PUNCT
fuelectenerg-402	134	35	,	,	PUNCT
fuelectenerg-402	134	36	in	in	ADP
fuelectenerg-402	134	37	proc	proc	NOUN
fuelectenerg-402	134	38	.	.	PUNCT
fuelectenerg-402	135	1	49th	49th	ADJ
fuelectenerg-402	135	2	conference	conference	NOUN
fuelectenerg-402	135	3	for	for	ADP
fuelectenerg-402	135	4	electronics	electronic	NOUN
fuelectenerg-402	135	5	,	,	PUNCT
fuelectenerg-402	135	6	telecommunications	telecommunication	NOUN
fuelectenerg-402	135	7	,	,	PUNCT
fuelectenerg-402	135	8	computers	computer	NOUN
fuelectenerg-402	135	9	,	,	PUNCT
fuelectenerg-402	135	10	automation	automation	NOUN
fuelectenerg-402	135	11	and	and	CCONJ
fuelectenerg-402	135	12	nuclear	nuclear	ADJ
fuelectenerg-402	135	13	engineering	engineering	NOUN
fuelectenerg-402	135	14	etran	etran	ADJ
fuelectenerg-402	135	15	,	,	PUNCT
fuelectenerg-402	135	16	budva	budva	NOUN
fuelectenerg-402	135	17	,	,	PUNCT
fuelectenerg-402	135	18	2005,vol	2005,vol	NUM
fuelectenerg-402	135	19	.	.	NOUN
fuelectenerg-402	135	20	4	4	NUM
fuelectenerg-402	135	21	,	,	PUNCT
fuelectenerg-402	135	22	pp	pp	ADJ
fuelectenerg-402	135	23	.	.	PUNCT
fuelectenerg-402	136	1	185	185	NUM
fuelectenerg-402	136	2	-	-	SYM
fuelectenerg-402	136	3	188	188	NUM
fuelectenerg-402	136	4	(	(	PUNCT
fuelectenerg-402	136	5	serbian	serbian	ADJ
fuelectenerg-402	136	6	)	)	PUNCT
fuelectenerg-402	136	7	.	.	PUNCT
fuelectenerg-402	137	1	[	[	X
fuelectenerg-402	137	2	7	7	X
fuelectenerg-402	137	3	]	]	X
fuelectenerg-402	137	4	m.	m.	NOUN
fuelectenerg-402	137	5	m.	m.	NOUN
fuelectenerg-402	137	6	smiljanić	smiljanić	PROPN
fuelectenerg-402	137	7	,	,	PUNCT
fuelectenerg-402	137	8	ž	ž	PROPN
fuelectenerg-402	137	9	.	.	PUNCT
fuelectenerg-402	137	10	lazić	lazić	PROPN
fuelectenerg-402	137	11	,	,	PUNCT
fuelectenerg-402	137	12	z.	z.	PROPN
fuelectenerg-402	137	13	djurić	djurić	PROPN
fuelectenerg-402	137	14	,	,	PUNCT
fuelectenerg-402	137	15	and	and	CCONJ
fuelectenerg-402	137	16	k.	k.	PROPN
fuelectenerg-402	137	17	radulović	radulović	PROPN
fuelectenerg-402	137	18	,	,	PUNCT
fuelectenerg-402	137	19	"	"	PUNCT
fuelectenerg-402	137	20	dizajn	dizajn	PROPN
fuelectenerg-402	137	21	i	i	PRON
fuelectenerg-402	137	22	modelovanje	modelovanje	PROPN
fuelectenerg-402	137	23	modifikovanog	modifikovanog	PROPN
fuelectenerg-402	137	24	senzora	senzora	PROPN
fuelectenerg-402	137	25	niskih	niskih	PROPN
fuelectenerg-402	137	26	pritisaka	pritisaka	PROPN
fuelectenerg-402	137	27	sp-6	sp-6	ADP
fuelectenerg-402	137	28	ihtm	ihtm	NOUN
fuelectenerg-402	137	29	-	-	PUNCT
fuelectenerg-402	137	30	cmtm	cmtm	PROPN
fuelectenerg-402	137	31	"	"	PUNCT
fuelectenerg-402	137	32	,	,	PUNCT
fuelectenerg-402	137	33	in	in	ADP
fuelectenerg-402	137	34	proc	proc	NOUN
fuelectenerg-402	137	35	.	.	PUNCT
fuelectenerg-402	138	1	51st	51st	ADJ
fuelectenerg-402	138	2	conference	conference	NOUN
fuelectenerg-402	138	3	for	for	ADP
fuelectenerg-402	138	4	electronics	electronic	NOUN
fuelectenerg-402	138	5	,	,	PUNCT
fuelectenerg-402	138	6	telecommunications	telecommunication	NOUN
fuelectenerg-402	138	7	,	,	PUNCT
fuelectenerg-402	138	8	computers	computer	NOUN
fuelectenerg-402	138	9	,	,	PUNCT
fuelectenerg-402	138	10	automation	automation	NOUN
fuelectenerg-402	138	11	and	and	CCONJ
fuelectenerg-402	138	12	nuclear	nuclear	ADJ
fuelectenerg-402	138	13	engineering	engineering	NOUN
fuelectenerg-402	138	14	etran	etran	ADJ
fuelectenerg-402	138	15	,	,	PUNCT
fuelectenerg-402	138	16	herceg	herceg	PROPN
fuelectenerg-402	138	17	novi	novi	PROPN
fuelectenerg-402	138	18	igalo	igalo	PROPN
fuelectenerg-402	138	19	,	,	PUNCT
fuelectenerg-402	138	20	2007	2007	NUM
fuelectenerg-402	138	21	,	,	PUNCT
fuelectenerg-402	138	22	pp	pp	ADV
fuelectenerg-402	138	23	.	.	PUNCT
fuelectenerg-402	139	1	mo3.2	mo3.2	X
fuelectenerg-402	139	2	-	-	PUNCT
fuelectenerg-402	139	3	1	1	NUM
fuelectenerg-402	139	4	-	-	SYM
fuelectenerg-402	139	5	4	4	NUM
fuelectenerg-402	139	6	(	(	PUNCT
fuelectenerg-402	139	7	serbian	serbian	ADJ
fuelectenerg-402	139	8	)	)	PUNCT
fuelectenerg-402	139	9	.	.	PUNCT
fuelectenerg-402	140	1	[	[	X
fuelectenerg-402	140	2	8	8	NUM
fuelectenerg-402	140	3	]	]	X
fuelectenerg-402	140	4	m.	m.	NOUN
fuelectenerg-402	140	5	m.	m.	NOUN
fuelectenerg-402	140	6	smiljanić	smiljanić	PROPN
fuelectenerg-402	140	7	,	,	PUNCT
fuelectenerg-402	140	8	z.	z.	PROPN
fuelectenerg-402	140	9	djurić	djurić	PROPN
fuelectenerg-402	140	10	,	,	PUNCT
fuelectenerg-402	140	11	ž	ž	PROPN
fuelectenerg-402	140	12	.	.	PUNCT
fuelectenerg-402	140	13	lazić	lazić	PROPN
fuelectenerg-402	140	14	,	,	PUNCT
fuelectenerg-402	140	15	and	and	CCONJ
fuelectenerg-402	140	16	b.	b.	PROPN
fuelectenerg-402	140	17	popović	popović	PROPN
fuelectenerg-402	140	18	,	,	PUNCT
fuelectenerg-402	140	19	"	"	PUNCT
fuelectenerg-402	140	20	soi	soi	ADJ
fuelectenerg-402	140	21	piezootporni	piezootporni	NOUN
fuelectenerg-402	140	22	senzor	senzor	NOUN
fuelectenerg-402	140	23	pritiska	pritiska	PROPN
fuelectenerg-402	140	24	za	za	PROPN
fuelectenerg-402	140	25	opseg	opseg	PROPN
fuelectenerg-402	140	26	radnih	radnih	PROPN
fuelectenerg-402	140	27	temperatura	temperatura	PROPN
fuelectenerg-402	140	28	od	od	PROPN
fuelectenerg-402	140	29	600c	600c	PROPN
fuelectenerg-402	140	30	do	do	VERB
fuelectenerg-402	140	31	3000c	3000c	NUM
fuelectenerg-402	140	32	"	"	PUNCT
fuelectenerg-402	140	33	,	,	PUNCT
fuelectenerg-402	140	34	in	in	ADP
fuelectenerg-402	140	35	proc	proc	NOUN
fuelectenerg-402	140	36	.	.	PUNCT
fuelectenerg-402	141	1	52nd	52nd	ADJ
fuelectenerg-402	141	2	conference	conference	NOUN
fuelectenerg-402	141	3	for	for	ADP
fuelectenerg-402	141	4	electronics	electronic	NOUN
fuelectenerg-402	141	5	,	,	PUNCT
fuelectenerg-402	141	6	telecommunications	telecommunication	NOUN
fuelectenerg-402	141	7	,	,	PUNCT
fuelectenerg-402	141	8	computers	computer	NOUN
fuelectenerg-402	141	9	,	,	PUNCT
fuelectenerg-402	141	10	automation	automation	NOUN
fuelectenerg-402	141	11	and	and	CCONJ
fuelectenerg-402	141	12	nuclear	nuclear	ADJ
fuelectenerg-402	141	13	engineering	engineering	NOUN
fuelectenerg-402	141	14	etran	etran	ADJ
fuelectenerg-402	141	15	,	,	PUNCT
fuelectenerg-402	141	16	palić	palić	NOUN
fuelectenerg-402	141	17	,	,	PUNCT
fuelectenerg-402	141	18	2008	2008	NUM
fuelectenerg-402	141	19	,	,	PUNCT
fuelectenerg-402	141	20	pp	pp	ADJ
fuelectenerg-402	141	21	.	.	PUNCT
fuelectenerg-402	142	1	mo2.6	mo2.6	PROPN
fuelectenerg-402	142	2	-	-	SYM
fuelectenerg-402	142	3	1	1	NUM
fuelectenerg-402	142	4	-	-	SYM
fuelectenerg-402	142	5	4	4	NUM
fuelectenerg-402	142	6	(	(	PUNCT
fuelectenerg-402	142	7	serbian	serbian	ADJ
fuelectenerg-402	142	8	)	)	PUNCT
fuelectenerg-402	142	9	.	.	PUNCT
fuelectenerg-402	143	1	[	[	X
fuelectenerg-402	143	2	9	9	NUM
fuelectenerg-402	143	3	]	]	PUNCT
fuelectenerg-402	143	4	m.	m.	NOUN
fuelectenerg-402	143	5	m.	m.	NOUN
fuelectenerg-402	143	6	smiljanić	smiljanić	PROPN
fuelectenerg-402	143	7	,	,	PUNCT
fuelectenerg-402	143	8	v.	v.	ADP
fuelectenerg-402	143	9	jović	jović	NOUN
fuelectenerg-402	143	10	,	,	PUNCT
fuelectenerg-402	143	11	and	and	CCONJ
fuelectenerg-402	143	12	ž	ž	X
fuelectenerg-402	143	13	.	.	PUNCT
fuelectenerg-402	143	14	lazić	lazić	PROPN
fuelectenerg-402	143	15	,	,	PUNCT
fuelectenerg-402	143	16	"	"	PUNCT
fuelectenerg-402	143	17	maskless	maskless	NOUN
fuelectenerg-402	143	18	convex	convex	NOUN
fuelectenerg-402	143	19	corner	corner	NOUN
fuelectenerg-402	143	20	compensation	compensation	NOUN
fuelectenerg-402	143	21	technique	technique	NOUN
fuelectenerg-402	143	22	on	on	ADP
fuelectenerg-402	143	23	a	a	DET
fuelectenerg-402	143	24	(	(	PUNCT
fuelectenerg-402	143	25	1	1	NUM
fuelectenerg-402	143	26	0	0	NUM
fuelectenerg-402	143	27	0	0	NUM
fuelectenerg-402	143	28	)	)	PUNCT
fuelectenerg-402	143	29	silicon	silicon	NOUN
fuelectenerg-402	143	30	substrate	substrate	NOUN
fuelectenerg-402	143	31	in	in	ADP
fuelectenerg-402	143	32	a	a	DET
fuelectenerg-402	143	33	25	25	NUM
fuelectenerg-402	143	34	wt%	wt%	VERB
fuelectenerg-402	143	35	tmah	tmah	ADJ
fuelectenerg-402	143	36	water	water	NOUN
fuelectenerg-402	143	37	solution	solution	NOUN
fuelectenerg-402	143	38	"	"	PUNCT
fuelectenerg-402	143	39	,	,	PUNCT
fuelectenerg-402	143	40	j.	j.	PROPN
fuelectenerg-402	143	41	micromech	micromech	PROPN
fuelectenerg-402	143	42	.	.	PUNCT
fuelectenerg-402	144	1	microeng	microeng	PROPN
fuelectenerg-402	144	2	.	.	PUNCT
fuelectenerg-402	145	1	22	22	NUM
fuelectenerg-402	145	2	115011	115011	NUM
fuelectenerg-402	145	3	,	,	PUNCT
fuelectenerg-402	145	4	1	1	NUM
fuelectenerg-402	145	5	-	-	SYM
fuelectenerg-402	145	6	11	11	NUM
fuelectenerg-402	145	7	,	,	PUNCT
fuelectenerg-402	145	8	2012	2012	NUM
fuelectenerg-402	145	9	,	,	PUNCT
fuelectenerg-402	145	10	doi:10.1088/0960	doi:10.1088/0960	NOUN
fuelectenerg-402	145	11	-	-	PUNCT
fuelectenerg-402	145	12	1317/22/11/115011	1317/22/11/115011	PROPN
fuelectenerg-402	145	13	[	[	X
fuelectenerg-402	145	14	10	10	NUM
fuelectenerg-402	145	15	]	]	PUNCT
fuelectenerg-402	145	16	m.	m.	NOUN
fuelectenerg-402	145	17	frantlović	frantlović	NOUN
fuelectenerg-402	145	18	,	,	PUNCT
fuelectenerg-402	145	19	i.	i.	PROPN
fuelectenerg-402	145	20	jokić	jokić	PROPN
fuelectenerg-402	145	21	,	,	PUNCT
fuelectenerg-402	145	22	and	and	CCONJ
fuelectenerg-402	145	23	d.	d.	PROPN
fuelectenerg-402	145	24	nešić	nešić	PROPN
fuelectenerg-402	145	25	,	,	PUNCT
fuelectenerg-402	145	26	"	"	PUNCT
fuelectenerg-402	145	27	a	a	DET
fuelectenerg-402	145	28	wireless	wireless	ADJ
fuelectenerg-402	145	29	system	system	NOUN
fuelectenerg-402	145	30	for	for	ADP
fuelectenerg-402	145	31	liquid	liquid	ADJ
fuelectenerg-402	145	32	level	level	NOUN
fuelectenerg-402	145	33	measurement	measurement	NOUN
fuelectenerg-402	145	34	"	"	PUNCT
fuelectenerg-402	145	35	,	,	PUNCT
fuelectenerg-402	145	36	in	in	ADP
fuelectenerg-402	145	37	proc	proc	NOUN
fuelectenerg-402	145	38	.	.	PUNCT
fuelectenerg-402	146	1	8th	8th	ADJ
fuelectenerg-402	146	2	international	international	ADJ
fuelectenerg-402	146	3	conference	conference	NOUN
fuelectenerg-402	146	4	on	on	ADP
fuelectenerg-402	146	5	telecommunication	telecommunication	NOUN
fuelectenerg-402	146	6	in	in	ADP
fuelectenerg-402	146	7	modern	modern	ADJ
fuelectenerg-402	146	8	satellite	satellite	NOUN
fuelectenerg-402	146	9	,	,	PUNCT
fuelectenerg-402	146	10	cable	cable	NOUN
fuelectenerg-402	146	11	and	and	CCONJ
fuelectenerg-402	146	12	broadcasting	broadcasting	NOUN
fuelectenerg-402	146	13	services	service	NOUN
fuelectenerg-402	146	14	telsiks	telsik	NOUN
fuelectenerg-402	146	15	,	,	PUNCT
fuelectenerg-402	146	16	2007	2007	NUM
fuelectenerg-402	146	17	,	,	PUNCT
fuelectenerg-402	146	18	pp	pp	ADJ
fuelectenerg-402	146	19	.	.	PUNCT
fuelectenerg-402	147	1	475	475	NUM
fuelectenerg-402	147	2	-	-	SYM
fuelectenerg-402	147	3	8	8	NUM
fuelectenerg-402	147	4	.	.	PUNCT
fuelectenerg-402	148	1	[	[	X
fuelectenerg-402	148	2	11	11	NUM
fuelectenerg-402	148	3	]	]	PUNCT
fuelectenerg-402	148	4	m.	m.	NOUN
fuelectenerg-402	148	5	frantlović	frantlović	NOUN
fuelectenerg-402	148	6	,	,	PUNCT
fuelectenerg-402	148	7	v.	v.	ADP
fuelectenerg-402	148	8	jovanov	jovanov	NOUN
fuelectenerg-402	148	9	,	,	PUNCT
fuelectenerg-402	148	10	and	and	CCONJ
fuelectenerg-402	148	11	b.	b.	PROPN
fuelectenerg-402	148	12	miljković	miljković	PROPN
fuelectenerg-402	148	13	,	,	PUNCT
fuelectenerg-402	148	14	"	"	PUNCT
fuelectenerg-402	148	15	intelligent	intelligent	ADJ
fuelectenerg-402	148	16	industrial	industrial	ADJ
fuelectenerg-402	148	17	transmitters	transmitter	NOUN
fuelectenerg-402	148	18	of	of	ADP
fuelectenerg-402	148	19	pressure	pressure	NOUN
fuelectenerg-402	148	20	and	and	CCONJ
fuelectenerg-402	148	21	other	other	ADJ
fuelectenerg-402	148	22	process	process	NOUN
fuelectenerg-402	148	23	parameters	parameter	NOUN
fuelectenerg-402	148	24	"	"	PUNCT
fuelectenerg-402	148	25	,	,	PUNCT
fuelectenerg-402	148	26	telfor	telfor	PROPN
fuelectenerg-402	148	27	journal	journal	PROPN
fuelectenerg-402	148	28	,	,	PUNCT
fuelectenerg-402	148	29	2009	2009	NUM
fuelectenerg-402	148	30	,	,	PUNCT
fuelectenerg-402	148	31	vol	vol	NOUN
fuelectenerg-402	148	32	.	.	PROPN
fuelectenerg-402	148	33	1	1	NUM
fuelectenerg-402	148	34	,	,	PUNCT
fuelectenerg-402	148	35	no	no	INTJ
fuelectenerg-402	148	36	.	.	NOUN
fuelectenerg-402	148	37	2	2	NUM
fuelectenerg-402	148	38	,	,	PUNCT
fuelectenerg-402	148	39	pp	pp	ADJ
fuelectenerg-402	148	40	.	.	PUNCT
fuelectenerg-402	149	1	65	65	NUM
fuelectenerg-402	149	2	-	-	SYM
fuelectenerg-402	149	3	8	8	NUM
fuelectenerg-402	149	4	.	.	PUNCT
fuelectenerg-402	150	1	[	[	X
fuelectenerg-402	150	2	12	12	NUM
fuelectenerg-402	150	3	]	]	PUNCT
fuelectenerg-402	150	4	j.	j.	PROPN
fuelectenerg-402	150	5	wolberg	wolberg	PROPN
fuelectenerg-402	150	6	,	,	PUNCT
fuelectenerg-402	150	7	data	data	VERB
fuelectenerg-402	150	8	analysis	analysis	NOUN
fuelectenerg-402	150	9	using	use	VERB
fuelectenerg-402	150	10	the	the	DET
fuelectenerg-402	150	11	method	method	NOUN
fuelectenerg-402	150	12	of	of	ADP
fuelectenerg-402	150	13	least	least	ADJ
fuelectenerg-402	150	14	squares	square	NOUN
fuelectenerg-402	150	15	,	,	PUNCT
fuelectenerg-402	150	16	berlin	berlin	PROPN
fuelectenerg-402	150	17	,	,	PUNCT
fuelectenerg-402	150	18	heidelberg	heidelberg	NOUN
fuelectenerg-402	150	19	:	:	PUNCT
fuelectenerg-402	150	20	springerverlag	springerverlag	PROPN
fuelectenerg-402	150	21	,	,	PUNCT
fuelectenerg-402	150	22	2006	2006	NUM
fuelectenerg-402	150	23	.	.	PUNCT
fuelectenerg-402	151	1	[	[	X
fuelectenerg-402	151	2	13	13	NUM
fuelectenerg-402	151	3	]	]	PUNCT
fuelectenerg-402	151	4	s.	s.	PROPN
fuelectenerg-402	151	5	s.	s.	PROPN
fuelectenerg-402	151	6	kumar	kumar	PROPN
fuelectenerg-402	151	7	,	,	PUNCT
fuelectenerg-402	151	8	b.	b.	PROPN
fuelectenerg-402	151	9	d.	d.	PROPN
fuelectenerg-402	151	10	pant	pant	PROPN
fuelectenerg-402	151	11	,	,	PUNCT
fuelectenerg-402	151	12	"	"	PUNCT
fuelectenerg-402	151	13	design	design	NOUN
fuelectenerg-402	151	14	principles	principle	NOUN
fuelectenerg-402	151	15	and	and	CCONJ
fuelectenerg-402	151	16	considerations	consideration	NOUN
fuelectenerg-402	151	17	for	for	ADP
fuelectenerg-402	151	18	the	the	DET
fuelectenerg-402	151	19	‘	'	PUNCT
fuelectenerg-402	151	20	ideal	ideal	ADJ
fuelectenerg-402	151	21	’	'	PUNCT
fuelectenerg-402	151	22	silicon	silicon	NOUN
fuelectenerg-402	151	23	piezoresistive	piezoresistive	ADJ
fuelectenerg-402	151	24	pressure	pressure	NOUN
fuelectenerg-402	151	25	sensor	sensor	NOUN
fuelectenerg-402	151	26	:	:	PUNCT
fuelectenerg-402	151	27	a	a	DET
fuelectenerg-402	151	28	focused	focused	ADJ
fuelectenerg-402	151	29	review	review	NOUN
fuelectenerg-402	151	30	"	"	PUNCT
fuelectenerg-402	151	31	,	,	PUNCT
fuelectenerg-402	151	32	microsyst	microsyst	NOUN
fuelectenerg-402	151	33	.	.	PUNCT
fuelectenerg-402	152	1	technol	technol	PROPN
fuelectenerg-402	152	2	.	.	PROPN
fuelectenerg-402	152	3	,	,	PUNCT
fuelectenerg-402	152	4	vol	vol	NOUN
fuelectenerg-402	152	5	.	.	PROPN
fuelectenerg-402	152	6	20	20	NUM
fuelectenerg-402	152	7	,	,	PUNCT
fuelectenerg-402	152	8	pp	pp	ADJ
fuelectenerg-402	152	9	.	.	PUNCT
fuelectenerg-402	153	1	1213	1213	NUM
fuelectenerg-402	153	2	–	–	PUNCT
fuelectenerg-402	153	3	1247	1247	NUM
fuelectenerg-402	153	4	,	,	PUNCT
fuelectenerg-402	153	5	2014	2014	NUM
fuelectenerg-402	153	6	.	.	PUNCT