id	sid	tid	token	lemma	pos
fuelectenerg-421	1	1	instruction	instruction	NOUN
fuelectenerg-421	1	2	facta	facta	PROPN
fuelectenerg-421	1	3	universitatis	universitatis	PROPN
fuelectenerg-421	1	4	series	series	NOUN
fuelectenerg-421	1	5	:	:	PUNCT
fuelectenerg-421	1	6	electronics	electronic	NOUN
fuelectenerg-421	1	7	and	and	CCONJ
fuelectenerg-421	1	8	energetics	energetics	NOUN
fuelectenerg-421	1	9	vol	vol	NOUN
fuelectenerg-421	1	10	.	.	PUNCT
fuelectenerg-421	1	11	28	28	NUM
fuelectenerg-421	1	12	,	,	PUNCT
fuelectenerg-421	1	13	no	no	DET
fuelectenerg-421	1	14	2	2	NUM
fuelectenerg-421	1	15	,	,	PUNCT
fuelectenerg-421	1	16	june	june	PROPN
fuelectenerg-421	1	17	2015	2015	NUM
fuelectenerg-421	1	18	,	,	PUNCT
fuelectenerg-421	1	19	pp	pp	ADJ
fuelectenerg-421	1	20	.	.	PUNCT
fuelectenerg-421	2	1	263	263	NUM
fuelectenerg-421	2	2	274	274	NUM
fuelectenerg-421	2	3	doi	doi	NOUN
fuelectenerg-421	2	4	:	:	PUNCT
fuelectenerg-421	2	5	10.2298	10.2298	NUM
fuelectenerg-421	2	6	/	/	SYM
fuelectenerg-421	2	7	fuee1502263a	fuee1502263a	VERB
fuelectenerg-421	2	8	design	design	NOUN
fuelectenerg-421	2	9	of	of	ADP
fuelectenerg-421	2	10	cmos	cmos	ADJ
fuelectenerg-421	2	11	readout	readout	PROPN
fuelectenerg-421	2	12	frontend	frontend	NOUN
fuelectenerg-421	2	13	circuit	circuit	NOUN
fuelectenerg-421	2	14	for	for	ADP
fuelectenerg-421	2	15	mems	mem	NOUN
fuelectenerg-421	2	16	capacitive	capacitive	ADJ
fuelectenerg-421	2	17	microphones	microphone	NOUN
fuelectenerg-421	2	18			PUNCT
fuelectenerg-421	2	19	daniel	daniel	PROPN
fuelectenerg-421	2	20	arbet	arbet	PROPN
fuelectenerg-421	2	21	,	,	PUNCT
fuelectenerg-421	2	22	viera	viera	PROPN
fuelectenerg-421	2	23	stopjaková	stopjaková	PROPN
fuelectenerg-421	2	24	,	,	PUNCT
fuelectenerg-421	2	25	martin	martin	PROPN
fuelectenerg-421	2	26	kováč	kováč	PROPN
fuelectenerg-421	2	27	,	,	PUNCT
fuelectenerg-421	2	28	lukáš	lukáš	ADJ
fuelectenerg-421	2	29	nagy	nagy	NOUN
fuelectenerg-421	2	30	,	,	PUNCT
fuelectenerg-421	2	31	gabriel	gabriel	PROPN
fuelectenerg-421	2	32	nagy	nagy	PROPN
fuelectenerg-421	2	33	slovak	slovak	PROPN
fuelectenerg-421	2	34	university	university	PROPN
fuelectenerg-421	2	35	of	of	ADP
fuelectenerg-421	2	36	technology	technology	NOUN
fuelectenerg-421	2	37	in	in	ADP
fuelectenerg-421	2	38	bratislava	bratislava	PROPN
fuelectenerg-421	2	39	faculty	faculty	NOUN
fuelectenerg-421	2	40	of	of	ADP
fuelectenerg-421	2	41	electrical	electrical	ADJ
fuelectenerg-421	2	42	engineering	engineering	NOUN
fuelectenerg-421	2	43	and	and	CCONJ
fuelectenerg-421	2	44	information	information	NOUN
fuelectenerg-421	2	45	technology	technology	PROPN
fuelectenerg-421	2	46	institute	institute	PROPN
fuelectenerg-421	2	47	of	of	ADP
fuelectenerg-421	2	48	electronics	electronics	PROPN
fuelectenerg-421	2	49	and	and	CCONJ
fuelectenerg-421	2	50	photonics	photonics	PROPN
fuelectenerg-421	2	51	department	department	PROPN
fuelectenerg-421	2	52	of	of	ADP
fuelectenerg-421	2	53	ic	ic	PROPN
fuelectenerg-421	2	54	design	design	NOUN
fuelectenerg-421	2	55	and	and	CCONJ
fuelectenerg-421	2	56	test	test	NOUN
fuelectenerg-421	2	57	abstract	abstract	NOUN
fuelectenerg-421	2	58	.	.	PUNCT
fuelectenerg-421	3	1	this	this	DET
fuelectenerg-421	3	2	paper	paper	NOUN
fuelectenerg-421	3	3	deals	deal	VERB
fuelectenerg-421	3	4	with	with	ADP
fuelectenerg-421	3	5	a	a	DET
fuelectenerg-421	3	6	frontend	frontend	NOUN
fuelectenerg-421	3	7	part	part	NOUN
fuelectenerg-421	3	8	of	of	ADP
fuelectenerg-421	3	9	the	the	DET
fuelectenerg-421	3	10	readout	readout	NOUN
fuelectenerg-421	3	11	circuit	circuit	NOUN
fuelectenerg-421	3	12	developed	develop	VERB
fuelectenerg-421	3	13	as	as	ADP
fuelectenerg-421	3	14	an	an	DET
fuelectenerg-421	3	15	integrated	integrated	ADJ
fuelectenerg-421	3	16	circuit	circuit	NOUN
fuelectenerg-421	3	17	that	that	SCONJ
fuelectenerg-421	3	18	after	after	ADP
fuelectenerg-421	3	19	bonding	bond	VERB
fuelectenerg-421	3	20	together	together	ADV
fuelectenerg-421	3	21	with	with	ADP
fuelectenerg-421	3	22	a	a	DET
fuelectenerg-421	3	23	mems	mem	NOUN
fuelectenerg-421	3	24	capacitive	capacitive	ADJ
fuelectenerg-421	3	25	microphone	microphone	NOUN
fuelectenerg-421	3	26	(	(	PUNCT
fuelectenerg-421	3	27	mcm	mcm	PROPN
fuelectenerg-421	3	28	)	)	PUNCT
fuelectenerg-421	3	29	chip	chip	NOUN
fuelectenerg-421	3	30	will	will	AUX
fuelectenerg-421	3	31	be	be	AUX
fuelectenerg-421	3	32	used	use	VERB
fuelectenerg-421	3	33	in	in	ADP
fuelectenerg-421	3	34	a	a	DET
fuelectenerg-421	3	35	noise	noise	NOUN
fuelectenerg-421	3	36	dosimeter	dosimeter	NOUN
fuelectenerg-421	3	37	applicable	applicable	ADJ
fuelectenerg-421	3	38	in	in	ADP
fuelectenerg-421	3	39	very	very	ADV
fuelectenerg-421	3	40	noisy	noisy	ADJ
fuelectenerg-421	3	41	and	and	CCONJ
fuelectenerg-421	3	42	harsh	harsh	ADJ
fuelectenerg-421	3	43	environment	environment	NOUN
fuelectenerg-421	3	44	,	,	PUNCT
fuelectenerg-421	3	45	e.g.	e.g.	ADV
fuelectenerg-421	3	46	mine	mine	NOUN
fuelectenerg-421	3	47	.	.	PUNCT
fuelectenerg-421	4	1	therefore	therefore	ADV
fuelectenerg-421	4	2	,	,	PUNCT
fuelectenerg-421	4	3	the	the	DET
fuelectenerg-421	4	4	main	main	ADJ
fuelectenerg-421	4	5	attention	attention	NOUN
fuelectenerg-421	4	6	has	have	AUX
fuelectenerg-421	4	7	been	be	AUX
fuelectenerg-421	4	8	paid	pay	VERB
fuelectenerg-421	4	9	to	to	ADP
fuelectenerg-421	4	10	the	the	DET
fuelectenerg-421	4	11	high	high	ADJ
fuelectenerg-421	4	12	dynamic	dynamic	ADJ
fuelectenerg-421	4	13	range	range	NOUN
fuelectenerg-421	4	14	,	,	PUNCT
fuelectenerg-421	4	15	low	low	ADJ
fuelectenerg-421	4	16	offset	offset	NOUN
fuelectenerg-421	4	17	and	and	CCONJ
fuelectenerg-421	4	18	low	low	ADJ
fuelectenerg-421	4	19	noise	noise	NOUN
fuelectenerg-421	4	20	of	of	ADP
fuelectenerg-421	4	21	the	the	DET
fuelectenerg-421	4	22	developed	develop	VERB
fuelectenerg-421	4	23	readout	readout	NOUN
fuelectenerg-421	4	24	interface	interface	NOUN
fuelectenerg-421	4	25	as	as	ADV
fuelectenerg-421	4	26	well	well	ADV
fuelectenerg-421	4	27	as	as	ADP
fuelectenerg-421	4	28	its	its	PRON
fuelectenerg-421	4	29	lowpower	lowpower	NOUN
fuelectenerg-421	4	30	consumption	consumption	NOUN
fuelectenerg-421	4	31	feature	feature	NOUN
fuelectenerg-421	4	32	.	.	PUNCT
fuelectenerg-421	5	1	for	for	ADP
fuelectenerg-421	5	2	conversion	conversion	NOUN
fuelectenerg-421	5	3	of	of	ADP
fuelectenerg-421	5	4	the	the	DET
fuelectenerg-421	5	5	mcm	mcm	PROPN
fuelectenerg-421	5	6	’s	’s	PART
fuelectenerg-421	5	7	capacitance	capacitance	NOUN
fuelectenerg-421	5	8	variation	variation	NOUN
fuelectenerg-421	5	9	into	into	ADP
fuelectenerg-421	5	10	voltage	voltage	NOUN
fuelectenerg-421	5	11	,	,	PUNCT
fuelectenerg-421	5	12	an	an	DET
fuelectenerg-421	5	13	approach	approach	NOUN
fuelectenerg-421	5	14	based	base	VERB
fuelectenerg-421	5	15	on	on	ADP
fuelectenerg-421	5	16	the	the	DET
fuelectenerg-421	5	17	buffered	buffer	VERB
fuelectenerg-421	5	18	input	input	NOUN
fuelectenerg-421	5	19	conversion	conversion	NOUN
fuelectenerg-421	5	20	stage	stage	NOUN
fuelectenerg-421	5	21	biased	bias	VERB
fuelectenerg-421	5	22	by	by	ADP
fuelectenerg-421	5	23	a	a	DET
fuelectenerg-421	5	24	voltage	voltage	NOUN
fuelectenerg-421	5	25	divider	divider	NOUN
fuelectenerg-421	5	26	was	be	AUX
fuelectenerg-421	5	27	used	use	VERB
fuelectenerg-421	5	28	.	.	PUNCT
fuelectenerg-421	6	1	the	the	DET
fuelectenerg-421	6	2	advantage	advantage	NOUN
fuelectenerg-421	6	3	of	of	ADP
fuelectenerg-421	6	4	this	this	DET
fuelectenerg-421	6	5	approach	approach	NOUN
fuelectenerg-421	6	6	is	be	AUX
fuelectenerg-421	6	7	that	that	SCONJ
fuelectenerg-421	6	8	the	the	DET
fuelectenerg-421	6	9	voltage	voltage	NOUN
fuelectenerg-421	6	10	divider	divider	NOUN
fuelectenerg-421	6	11	formed	form	VERB
fuelectenerg-421	6	12	by	by	ADP
fuelectenerg-421	6	13	mos	mos	PROPN
fuelectenerg-421	6	14	transistors	transistor	NOUN
fuelectenerg-421	6	15	can	can	AUX
fuelectenerg-421	6	16	be	be	AUX
fuelectenerg-421	6	17	connected	connect	VERB
fuelectenerg-421	6	18	to	to	ADP
fuelectenerg-421	6	19	the	the	DET
fuelectenerg-421	6	20	high	high	ADJ
fuelectenerg-421	6	21	-	-	PUNCT
fuelectenerg-421	6	22	impedance	impedance	NOUN
fuelectenerg-421	6	23	node	node	NOUN
fuelectenerg-421	6	24	(	(	PUNCT
fuelectenerg-421	6	25	i.e.	i.e.	X
fuelectenerg-421	6	26	the	the	DET
fuelectenerg-421	6	27	output	output	NOUN
fuelectenerg-421	6	28	of	of	ADP
fuelectenerg-421	6	29	the	the	DET
fuelectenerg-421	6	30	mcm	mcm	PROPN
fuelectenerg-421	6	31	,	,	PUNCT
fuelectenerg-421	6	32	in	in	ADP
fuelectenerg-421	6	33	this	this	DET
fuelectenerg-421	6	34	case	case	NOUN
fuelectenerg-421	6	35	)	)	PUNCT
fuelectenerg-421	6	36	.	.	PUNCT
fuelectenerg-421	7	1	the	the	DET
fuelectenerg-421	7	2	whole	whole	ADJ
fuelectenerg-421	7	3	frontend	frontend	NOUN
fuelectenerg-421	7	4	part	part	NOUN
fuelectenerg-421	7	5	of	of	ADP
fuelectenerg-421	7	6	the	the	DET
fuelectenerg-421	7	7	readout	readout	NOUN
fuelectenerg-421	7	8	interface	interface	NOUN
fuelectenerg-421	7	9	was	be	AUX
fuelectenerg-421	7	10	designed	design	VERB
fuelectenerg-421	7	11	in	in	ADP
fuelectenerg-421	7	12	a	a	DET
fuelectenerg-421	7	13	standard	standard	ADJ
fuelectenerg-421	7	14	0.35m	0.35m	PROPN
fuelectenerg-421	7	15	cmos	cmos	PROPN
fuelectenerg-421	7	16	technology	technology	NOUN
fuelectenerg-421	7	17	.	.	PUNCT
fuelectenerg-421	8	1	finally	finally	ADV
fuelectenerg-421	8	2	,	,	PUNCT
fuelectenerg-421	8	3	the	the	DET
fuelectenerg-421	8	4	achieved	achieve	VERB
fuelectenerg-421	8	5	results	result	NOUN
fuelectenerg-421	8	6	are	be	AUX
fuelectenerg-421	8	7	discussed	discuss	VERB
fuelectenerg-421	8	8	and	and	CCONJ
fuelectenerg-421	8	9	compared	compare	VERB
fuelectenerg-421	8	10	to	to	ADP
fuelectenerg-421	8	11	other	other	ADJ
fuelectenerg-421	8	12	works	work	NOUN
fuelectenerg-421	8	13	.	.	PUNCT
fuelectenerg-421	9	1	key	key	ADJ
fuelectenerg-421	9	2	words	word	NOUN
fuelectenerg-421	9	3	:	:	PUNCT
fuelectenerg-421	9	4	readout	readout	VERB
fuelectenerg-421	9	5	interface	interface	NOUN
fuelectenerg-421	9	6	,	,	PUNCT
fuelectenerg-421	9	7	mems	mem	NOUN
fuelectenerg-421	9	8	microphones	microphone	NOUN
fuelectenerg-421	9	9	,	,	PUNCT
fuelectenerg-421	9	10	analog	analog	ADJ
fuelectenerg-421	9	11	front	front	ADJ
fuelectenerg-421	9	12	-	-	PUNCT
fuelectenerg-421	9	13	end	end	NOUN
fuelectenerg-421	9	14	,	,	PUNCT
fuelectenerg-421	9	15	preamplifier	preamplifier	NOUN
fuelectenerg-421	9	16	1	1	NUM
fuelectenerg-421	9	17	.	.	PUNCT
fuelectenerg-421	9	18	introduction	introduction	NOUN
fuelectenerg-421	9	19	mems	mem	NOUN
fuelectenerg-421	9	20	(	(	PUNCT
fuelectenerg-421	9	21	micro	micro	NOUN
fuelectenerg-421	9	22	-	-	ADJ
fuelectenerg-421	9	23	electro	electro	ADJ
fuelectenerg-421	9	24	-	-	PUNCT
fuelectenerg-421	9	25	mechanical	mechanical	ADJ
fuelectenerg-421	9	26	-	-	PUNCT
fuelectenerg-421	9	27	system	system	NOUN
fuelectenerg-421	9	28	)	)	PUNCT
fuelectenerg-421	9	29	microphones	microphone	NOUN
fuelectenerg-421	9	30	are	be	AUX
fuelectenerg-421	9	31	commonly	commonly	ADV
fuelectenerg-421	9	32	used	use	VERB
fuelectenerg-421	9	33	devices	device	NOUN
fuelectenerg-421	9	34	in	in	ADP
fuelectenerg-421	9	35	a	a	DET
fuelectenerg-421	9	36	portable	portable	ADJ
fuelectenerg-421	9	37	electronic	electronic	ADJ
fuelectenerg-421	9	38	systems	system	NOUN
fuelectenerg-421	9	39	,	,	PUNCT
fuelectenerg-421	9	40	because	because	SCONJ
fuelectenerg-421	9	41	they	they	PRON
fuelectenerg-421	9	42	offer	offer	VERB
fuelectenerg-421	9	43	the	the	DET
fuelectenerg-421	9	44	miniaturization	miniaturization	NOUN
fuelectenerg-421	9	45	and	and	CCONJ
fuelectenerg-421	9	46	integration	integration	NOUN
fuelectenerg-421	9	47	of	of	ADP
fuelectenerg-421	9	48	the	the	DET
fuelectenerg-421	9	49	whole	whole	ADJ
fuelectenerg-421	9	50	system	system	NOUN
fuelectenerg-421	9	51	on	on	ADP
fuelectenerg-421	9	52	a	a	DET
fuelectenerg-421	9	53	single	single	ADJ
fuelectenerg-421	9	54	chip	chip	NOUN
fuelectenerg-421	9	55	.	.	PUNCT
fuelectenerg-421	10	1	for	for	ADP
fuelectenerg-421	10	2	such	such	ADJ
fuelectenerg-421	10	3	integration	integration	NOUN
fuelectenerg-421	10	4	,	,	PUNCT
fuelectenerg-421	10	5	cmos	cmos	PROPN
fuelectenerg-421	10	6	technology	technology	NOUN
fuelectenerg-421	10	7	is	be	AUX
fuelectenerg-421	10	8	rather	rather	ADV
fuelectenerg-421	10	9	advantageous	advantageous	ADJ
fuelectenerg-421	10	10	thanks	thank	NOUN
fuelectenerg-421	10	11	to	to	ADP
fuelectenerg-421	10	12	its	its	PRON
fuelectenerg-421	10	13	good	good	ADJ
fuelectenerg-421	10	14	compatibility	compatibility	NOUN
fuelectenerg-421	10	15	with	with	ADP
fuelectenerg-421	10	16	mems	mem	NOUN
fuelectenerg-421	10	17	manufacturing	manufacturing	NOUN
fuelectenerg-421	10	18	process	process	NOUN
fuelectenerg-421	10	19	and	and	CCONJ
fuelectenerg-421	10	20	relatively	relatively	ADV
fuelectenerg-421	10	21	low	low	ADJ
fuelectenerg-421	10	22	price	price	NOUN
fuelectenerg-421	10	23	.	.	PUNCT
fuelectenerg-421	11	1	mcms	mcms	PROPN
fuelectenerg-421	11	2	are	be	AUX
fuelectenerg-421	11	3	acoustic	acoustic	ADJ
fuelectenerg-421	11	4	sensors	sensor	NOUN
fuelectenerg-421	11	5	being	be	AUX
fuelectenerg-421	11	6	proposed	propose	VERB
fuelectenerg-421	11	7	to	to	PART
fuelectenerg-421	11	8	improve	improve	VERB
fuelectenerg-421	11	9	the	the	DET
fuelectenerg-421	11	10	integration	integration	NOUN
fuelectenerg-421	11	11	and	and	CCONJ
fuelectenerg-421	11	12	cost	cost	NOUN
fuelectenerg-421	11	13	of	of	ADP
fuelectenerg-421	11	14	acoustic	acoustic	ADJ
fuelectenerg-421	11	15	systems	system	NOUN
fuelectenerg-421	11	16	by	by	ADP
fuelectenerg-421	11	17	employing	employ	VERB
fuelectenerg-421	11	18	great	great	ADJ
fuelectenerg-421	11	19	features	feature	NOUN
fuelectenerg-421	11	20	of	of	ADP
fuelectenerg-421	11	21	advanced	advanced	ADJ
fuelectenerg-421	11	22	mems	mem	NOUN
fuelectenerg-421	11	23	technologies	technology	NOUN
fuelectenerg-421	11	24	.	.	PUNCT
fuelectenerg-421	12	1	even	even	ADV
fuelectenerg-421	12	2	though	though	SCONJ
fuelectenerg-421	12	3	the	the	DET
fuelectenerg-421	12	4	well	well	ADV
fuelectenerg-421	12	5	-	-	PUNCT
fuelectenerg-421	12	6	known	know	VERB
fuelectenerg-421	12	7	electret	electret	NOUN
fuelectenerg-421	12	8	-	-	PUNCT
fuelectenerg-421	12	9	condenser	condenser	NOUN
fuelectenerg-421	12	10	-	-	PUNCT
fuelectenerg-421	12	11	microphones	microphone	NOUN
fuelectenerg-421	12	12	(	(	PUNCT
fuelectenerg-421	12	13	ecm	ecm	NOUN
fuelectenerg-421	12	14	)	)	PUNCT
fuelectenerg-421	12	15	still	still	ADV
fuelectenerg-421	12	16	represent	represent	VERB
fuelectenerg-421	12	17	the	the	DET
fuelectenerg-421	12	18	current	current	ADJ
fuelectenerg-421	12	19	market	market	NOUN
fuelectenerg-421	12	20	solution	solution	NOUN
fuelectenerg-421	12	21	for	for	ADP
fuelectenerg-421	12	22	most	most	ADJ
fuelectenerg-421	12	23	of	of	ADP
fuelectenerg-421	12	24	acoustic	acoustic	ADJ
fuelectenerg-421	12	25	applications	application	NOUN
fuelectenerg-421	12	26	,	,	PUNCT
fuelectenerg-421	12	27	mcms	mcms	PROPN
fuelectenerg-421	12	28	are	be	AUX
fuelectenerg-421	12	29	considered	consider	VERB
fuelectenerg-421	12	30	as	as	ADP
fuelectenerg-421	12	31	the	the	DET
fuelectenerg-421	12	32	future	future	ADJ
fuelectenerg-421	12	33	choice	choice	NOUN
fuelectenerg-421	12	34	for	for	ADP
fuelectenerg-421	12	35	mobile	mobile	ADJ
fuelectenerg-421	12	36	phones	phone	NOUN
fuelectenerg-421	12	37	,	,	PUNCT
fuelectenerg-421	12	38	consumer	consumer	NOUN
fuelectenerg-421	12	39	electronics	electronic	NOUN
fuelectenerg-421	12	40	and	and	CCONJ
fuelectenerg-421	12	41	number	number	NOUN
fuelectenerg-421	12	42	of	of	ADP
fuelectenerg-421	12	43	medical	medical	ADJ
fuelectenerg-421	12	44	applications	application	NOUN
fuelectenerg-421	12	45	,	,	PUNCT
fuelectenerg-421	12	46	received	receive	VERB
fuelectenerg-421	12	47	august	august	PROPN
fuelectenerg-421	12	48	29	29	NUM
fuelectenerg-421	12	49	,	,	PUNCT
fuelectenerg-421	12	50	2014	2014	NUM
fuelectenerg-421	12	51	;	;	PUNCT
fuelectenerg-421	12	52	received	receive	VERB
fuelectenerg-421	12	53	in	in	ADP
fuelectenerg-421	12	54	revised	revise	VERB
fuelectenerg-421	12	55	form	form	NOUN
fuelectenerg-421	12	56	december	december	PROPN
fuelectenerg-421	12	57	4	4	NUM
fuelectenerg-421	12	58	,	,	PUNCT
fuelectenerg-421	12	59	2014	2014	NUM
fuelectenerg-421	12	60	corresponding	correspond	VERB
fuelectenerg-421	12	61	author	author	NOUN
fuelectenerg-421	12	62	:	:	PUNCT
fuelectenerg-421	12	63	daniel	daniel	PROPN
fuelectenerg-421	12	64	arbet	arbet	PROPN
fuelectenerg-421	12	65	department	department	PROPN
fuelectenerg-421	12	66	of	of	ADP
fuelectenerg-421	12	67	ic	ic	PROPN
fuelectenerg-421	12	68	design	design	NOUN
fuelectenerg-421	12	69	and	and	CCONJ
fuelectenerg-421	12	70	test	test	NOUN
fuelectenerg-421	12	71	,	,	PUNCT
fuelectenerg-421	12	72	slovak	slovak	ADJ
fuelectenerg-421	12	73	university	university	NOUN
fuelectenerg-421	12	74	of	of	ADP
fuelectenerg-421	12	75	technology	technology	NOUN
fuelectenerg-421	12	76	,	,	PUNCT
fuelectenerg-421	12	77	ilkovicova	ilkovicova	X
fuelectenerg-421	12	78	3	3	NUM
fuelectenerg-421	12	79	,	,	PUNCT
fuelectenerg-421	12	80	812	812	NUM
fuelectenerg-421	12	81	19	19	NUM
fuelectenerg-421	12	82	bratislava	bratislava	NOUN
fuelectenerg-421	12	83	,	,	PUNCT
fuelectenerg-421	12	84	slovakia	slovakia	PROPN
fuelectenerg-421	12	85	(	(	PUNCT
fuelectenerg-421	12	86	e	e	NOUN
fuelectenerg-421	12	87	-	-	NOUN
fuelectenerg-421	12	88	mail	mail	NOUN
fuelectenerg-421	12	89	:	:	PUNCT
fuelectenerg-421	12	90	daniel.arbet@stuba.sk	daniel.arbet@stuba.sk	NOUN
fuelectenerg-421	12	91	)	)	PUNCT
fuelectenerg-421	12	92	264	264	NUM
fuelectenerg-421	12	93	d.	d.	PROPN
fuelectenerg-421	12	94	arbet	arbet	PROPN
fuelectenerg-421	12	95	,	,	PUNCT
fuelectenerg-421	12	96	v.	v.	ADP
fuelectenerg-421	12	97	stopjaková	stopjaková	PROPN
fuelectenerg-421	12	98	,	,	PUNCT
fuelectenerg-421	12	99	m.	m.	NOUN
fuelectenerg-421	12	100	kováč	kováč	PROPN
fuelectenerg-421	12	101	,	,	PUNCT
fuelectenerg-421	12	102	l.	l.	PROPN
fuelectenerg-421	12	103	nagy	nagy	PROPN
fuelectenerg-421	12	104	,	,	PUNCT
fuelectenerg-421	12	105	g.	g.	PROPN
fuelectenerg-421	12	106	nagy	nagy	PROPN
fuelectenerg-421	12	107	e.g.	e.g.	ADV
fuelectenerg-421	12	108	hearing	hear	VERB
fuelectenerg-421	12	109	aids	aid	NOUN
fuelectenerg-421	12	110	[	[	X
fuelectenerg-421	12	111	1	1	NUM
fuelectenerg-421	12	112	]	]	PUNCT
fuelectenerg-421	12	113	.	.	PUNCT
fuelectenerg-421	13	1	with	with	ADP
fuelectenerg-421	13	2	the	the	DET
fuelectenerg-421	13	3	fast	fast	ADJ
fuelectenerg-421	13	4	development	development	NOUN
fuelectenerg-421	13	5	of	of	ADP
fuelectenerg-421	13	6	mems	mem	NOUN
fuelectenerg-421	13	7	technologies	technology	NOUN
fuelectenerg-421	13	8	also	also	ADV
fuelectenerg-421	13	9	the	the	DET
fuelectenerg-421	13	10	field	field	NOUN
fuelectenerg-421	13	11	of	of	ADP
fuelectenerg-421	13	12	possible	possible	ADJ
fuelectenerg-421	13	13	applications	application	NOUN
fuelectenerg-421	13	14	for	for	ADP
fuelectenerg-421	13	15	mems	mems	ADJ
fuelectenerg-421	13	16	sensors	sensor	NOUN
fuelectenerg-421	13	17	is	be	AUX
fuelectenerg-421	13	18	getting	get	VERB
fuelectenerg-421	13	19	wider	wide	ADJ
fuelectenerg-421	13	20	.	.	PUNCT
fuelectenerg-421	14	1	mcms	mcms	PROPN
fuelectenerg-421	14	2	offer	offer	VERB
fuelectenerg-421	14	3	several	several	ADJ
fuelectenerg-421	14	4	advantages	advantage	NOUN
fuelectenerg-421	14	5	over	over	ADP
fuelectenerg-421	14	6	the	the	DET
fuelectenerg-421	14	7	classical	classical	ADJ
fuelectenerg-421	14	8	ecms	ecms	NOUN
fuelectenerg-421	14	9	.	.	PUNCT
fuelectenerg-421	15	1	first	first	ADV
fuelectenerg-421	15	2	of	of	ADP
fuelectenerg-421	15	3	all	all	PRON
fuelectenerg-421	15	4	,	,	PUNCT
fuelectenerg-421	15	5	they	they	PRON
fuelectenerg-421	15	6	are	be	AUX
fuelectenerg-421	15	7	smaller	small	ADJ
fuelectenerg-421	15	8	in	in	ADP
fuelectenerg-421	15	9	size	size	NOUN
fuelectenerg-421	15	10	,	,	PUNCT
fuelectenerg-421	15	11	compatible	compatible	ADJ
fuelectenerg-421	15	12	with	with	ADP
fuelectenerg-421	15	13	high	high	ADJ
fuelectenerg-421	15	14	-	-	PUNCT
fuelectenerg-421	15	15	temperature	temperature	NOUN
fuelectenerg-421	15	16	automated	automate	VERB
fuelectenerg-421	15	17	printed	print	VERB
fuelectenerg-421	15	18	circuit	circuit	NOUN
fuelectenerg-421	15	19	board	board	NOUN
fuelectenerg-421	15	20	(	(	PUNCT
fuelectenerg-421	15	21	pcb	pcb	NOUN
fuelectenerg-421	15	22	)	)	PUNCT
fuelectenerg-421	15	23	mounting	mount	VERB
fuelectenerg-421	15	24	process	process	NOUN
fuelectenerg-421	15	25	and	and	CCONJ
fuelectenerg-421	15	26	less	less	ADV
fuelectenerg-421	15	27	susceptible	susceptible	ADJ
fuelectenerg-421	15	28	to	to	ADP
fuelectenerg-421	15	29	mechanical	mechanical	ADJ
fuelectenerg-421	15	30	shocks	shock	NOUN
fuelectenerg-421	15	31	.	.	PUNCT
fuelectenerg-421	16	1	furthermore	furthermore	ADV
fuelectenerg-421	16	2	,	,	PUNCT
fuelectenerg-421	16	3	the	the	DET
fuelectenerg-421	16	4	possibility	possibility	NOUN
fuelectenerg-421	16	5	of	of	ADP
fuelectenerg-421	16	6	monolithic	monolithic	ADJ
fuelectenerg-421	16	7	integration	integration	NOUN
fuelectenerg-421	16	8	of	of	ADP
fuelectenerg-421	16	9	the	the	DET
fuelectenerg-421	16	10	sound	sound	ADJ
fuelectenerg-421	16	11	sensor	sensor	NOUN
fuelectenerg-421	16	12	with	with	ADP
fuelectenerg-421	16	13	cmos	cmos	ADJ
fuelectenerg-421	16	14	electronics	electronic	NOUN
fuelectenerg-421	16	15	is	be	AUX
fuelectenerg-421	16	16	another	another	DET
fuelectenerg-421	16	17	major	major	ADJ
fuelectenerg-421	16	18	advantage	advantage	NOUN
fuelectenerg-421	16	19	towards	towards	ADP
fuelectenerg-421	16	20	a	a	DET
fuelectenerg-421	16	21	robust	robust	ADJ
fuelectenerg-421	16	22	and	and	CCONJ
fuelectenerg-421	16	23	cost	cost	NOUN
fuelectenerg-421	16	24	-	-	PUNCT
fuelectenerg-421	16	25	effective	effective	ADJ
fuelectenerg-421	16	26	system	system	NOUN
fuelectenerg-421	16	27	,	,	PUNCT
fuelectenerg-421	16	28	enabling	enable	VERB
fuelectenerg-421	16	29	both	both	CCONJ
fuelectenerg-421	16	30	the	the	DET
fuelectenerg-421	16	31	electrical	electrical	ADJ
fuelectenerg-421	16	32	and	and	CCONJ
fuelectenerg-421	16	33	mechanical	mechanical	ADJ
fuelectenerg-421	16	34	properties	property	NOUN
fuelectenerg-421	16	35	of	of	ADP
fuelectenerg-421	16	36	silicon	silicon	NOUN
fuelectenerg-421	16	37	.	.	PUNCT
fuelectenerg-421	17	1	to	to	PART
fuelectenerg-421	17	2	convert	convert	VERB
fuelectenerg-421	17	3	the	the	DET
fuelectenerg-421	17	4	output	output	NOUN
fuelectenerg-421	17	5	of	of	ADP
fuelectenerg-421	17	6	a	a	DET
fuelectenerg-421	17	7	mcm	mcm	PROPN
fuelectenerg-421	17	8	(	(	PUNCT
fuelectenerg-421	17	9	capacity	capacity	NOUN
fuelectenerg-421	17	10	variations	variation	NOUN
fuelectenerg-421	17	11	in	in	ADP
fuelectenerg-421	17	12	order	order	NOUN
fuelectenerg-421	17	13	of	of	ADP
fuelectenerg-421	17	14	ff	ff	NOUN
fuelectenerg-421	17	15	-	-	PUNCT
fuelectenerg-421	17	16	pf	pf	NOUN
fuelectenerg-421	17	17	)	)	PUNCT
fuelectenerg-421	17	18	into	into	ADP
fuelectenerg-421	17	19	an	an	DET
fuelectenerg-421	17	20	appropriate	appropriate	ADJ
fuelectenerg-421	17	21	electrical	electrical	ADJ
fuelectenerg-421	17	22	signal	signal	NOUN
fuelectenerg-421	17	23	representation	representation	NOUN
fuelectenerg-421	17	24	,	,	PUNCT
fuelectenerg-421	17	25	dedicated	dedicated	ADJ
fuelectenerg-421	17	26	circuitry	circuitry	NOUN
fuelectenerg-421	17	27	,	,	PUNCT
fuelectenerg-421	17	28	either	either	CCONJ
fuelectenerg-421	17	29	analog	analog	NOUN
fuelectenerg-421	17	30	or	or	CCONJ
fuelectenerg-421	17	31	digital	digital	ADJ
fuelectenerg-421	17	32	so	so	ADV
fuelectenerg-421	17	33	-	-	PUNCT
fuelectenerg-421	17	34	called	call	VERB
fuelectenerg-421	17	35	readout	readout	NOUN
fuelectenerg-421	17	36	interface	interface	NOUN
fuelectenerg-421	17	37	is	be	AUX
fuelectenerg-421	17	38	required	require	VERB
fuelectenerg-421	17	39	[	[	X
fuelectenerg-421	17	40	2]–[5	2]–[5	X
fuelectenerg-421	17	41	]	]	PUNCT
fuelectenerg-421	17	42	.	.	PUNCT
fuelectenerg-421	18	1	this	this	PRON
fuelectenerg-421	18	2	necessitates	necessitate	VERB
fuelectenerg-421	18	3	a	a	DET
fuelectenerg-421	18	4	low	low	ADJ
fuelectenerg-421	18	5	-	-	PUNCT
fuelectenerg-421	18	6	noise	noise	NOUN
fuelectenerg-421	18	7	signal	signal	NOUN
fuelectenerg-421	18	8	conversion	conversion	NOUN
fuelectenerg-421	18	9	provided	provide	VERB
fuelectenerg-421	18	10	by	by	ADP
fuelectenerg-421	18	11	the	the	DET
fuelectenerg-421	18	12	readout	readout	NOUN
fuelectenerg-421	18	13	interface	interface	NOUN
fuelectenerg-421	18	14	.	.	PUNCT
fuelectenerg-421	19	1	additionally	additionally	ADV
fuelectenerg-421	19	2	,	,	PUNCT
fuelectenerg-421	19	3	in	in	ADP
fuelectenerg-421	19	4	recent	recent	ADJ
fuelectenerg-421	19	5	applications	application	NOUN
fuelectenerg-421	19	6	,	,	PUNCT
fuelectenerg-421	19	7	lowpower	lowpower	NOUN
fuelectenerg-421	19	8	profile	profile	NOUN
fuelectenerg-421	19	9	is	be	AUX
fuelectenerg-421	19	10	required	require	VERB
fuelectenerg-421	19	11	in	in	ADP
fuelectenerg-421	19	12	order	order	NOUN
fuelectenerg-421	19	13	to	to	PART
fuelectenerg-421	19	14	provide	provide	VERB
fuelectenerg-421	19	15	the	the	DET
fuelectenerg-421	19	16	system	system	NOUN
fuelectenerg-421	19	17	portability	portability	NOUN
fuelectenerg-421	19	18	.	.	PUNCT
fuelectenerg-421	20	1	in	in	ADP
fuelectenerg-421	20	2	our	our	PRON
fuelectenerg-421	20	3	research	research	NOUN
fuelectenerg-421	20	4	,	,	PUNCT
fuelectenerg-421	20	5	a	a	DET
fuelectenerg-421	20	6	mcm	mcm	PROPN
fuelectenerg-421	20	7	-	-	PUNCT
fuelectenerg-421	20	8	based	base	VERB
fuelectenerg-421	20	9	application	application	NOUN
fuelectenerg-421	20	10	specific	specific	ADJ
fuelectenerg-421	20	11	integrated	integrate	VERB
fuelectenerg-421	20	12	circuit	circuit	NOUN
fuelectenerg-421	20	13	(	(	PUNCT
fuelectenerg-421	20	14	asic	asic	NOUN
fuelectenerg-421	20	15	)	)	PUNCT
fuelectenerg-421	20	16	designed	design	VERB
fuelectenerg-421	20	17	as	as	ADP
fuelectenerg-421	20	18	a	a	DET
fuelectenerg-421	20	19	part	part	NOUN
fuelectenerg-421	20	20	of	of	ADP
fuelectenerg-421	20	21	a	a	DET
fuelectenerg-421	20	22	portable	portable	ADJ
fuelectenerg-421	20	23	low	low	ADJ
fuelectenerg-421	20	24	-	-	PUNCT
fuelectenerg-421	20	25	cost	cost	NOUN
fuelectenerg-421	20	26	noise	noise	NOUN
fuelectenerg-421	20	27	dosimeter	dosimeter	NOUN
fuelectenerg-421	20	28	for	for	ADP
fuelectenerg-421	20	29	very	very	ADV
fuelectenerg-421	20	30	noisy	noisy	ADJ
fuelectenerg-421	20	31	and	and	CCONJ
fuelectenerg-421	20	32	harsh	harsh	ADJ
fuelectenerg-421	20	33	environment	environment	NOUN
fuelectenerg-421	20	34	is	be	AUX
fuelectenerg-421	20	35	targeted	target	VERB
fuelectenerg-421	20	36	.	.	PUNCT
fuelectenerg-421	21	1	therefore	therefore	ADV
fuelectenerg-421	21	2	,	,	PUNCT
fuelectenerg-421	21	3	the	the	DET
fuelectenerg-421	21	4	main	main	ADJ
fuelectenerg-421	21	5	goal	goal	NOUN
fuelectenerg-421	21	6	is	be	AUX
fuelectenerg-421	21	7	to	to	PART
fuelectenerg-421	21	8	develop	develop	VERB
fuelectenerg-421	21	9	a	a	DET
fuelectenerg-421	21	10	novel	novel	ADJ
fuelectenerg-421	21	11	readout	readout	NOUN
fuelectenerg-421	21	12	circuit	circuit	NOUN
fuelectenerg-421	21	13	schemes	scheme	NOUN
fuelectenerg-421	21	14	suitable	suitable	ADJ
fuelectenerg-421	21	15	for	for	ADP
fuelectenerg-421	21	16	such	such	ADJ
fuelectenerg-421	21	17	applications	application	NOUN
fuelectenerg-421	21	18	.	.	PUNCT
fuelectenerg-421	22	1	thus	thus	ADV
fuelectenerg-421	22	2	,	,	PUNCT
fuelectenerg-421	22	3	the	the	DET
fuelectenerg-421	22	4	most	most	ADV
fuelectenerg-421	22	5	significant	significant	ADJ
fuelectenerg-421	22	6	features	feature	NOUN
fuelectenerg-421	22	7	of	of	ADP
fuelectenerg-421	22	8	the	the	DET
fuelectenerg-421	22	9	developed	develop	VERB
fuelectenerg-421	22	10	asic	asic	NOUN
fuelectenerg-421	22	11	are	be	AUX
fuelectenerg-421	22	12	:	:	PUNCT
fuelectenerg-421	22	13	low	low	ADJ
fuelectenerg-421	22	14	power	power	NOUN
fuelectenerg-421	22	15	,	,	PUNCT
fuelectenerg-421	22	16	low	low	ADJ
fuelectenerg-421	22	17	cost	cost	NOUN
fuelectenerg-421	22	18	and	and	CCONJ
fuelectenerg-421	22	19	mass	mass	NOUN
fuelectenerg-421	22	20	production	production	NOUN
fuelectenerg-421	22	21	aspects	aspect	NOUN
fuelectenerg-421	22	22	.	.	PUNCT
fuelectenerg-421	23	1	moreover	moreover	ADV
fuelectenerg-421	23	2	,	,	PUNCT
fuelectenerg-421	23	3	a	a	DET
fuelectenerg-421	23	4	wide	wide	ADJ
fuelectenerg-421	23	5	dynamic	dynamic	ADJ
fuelectenerg-421	23	6	range	range	NOUN
fuelectenerg-421	23	7	of	of	ADP
fuelectenerg-421	23	8	the	the	DET
fuelectenerg-421	23	9	developed	develop	VERB
fuelectenerg-421	23	10	analog	analog	NOUN
fuelectenerg-421	23	11	frontend	frontend	NOUN
fuelectenerg-421	23	12	is	be	AUX
fuelectenerg-421	23	13	one	one	NUM
fuelectenerg-421	23	14	of	of	ADP
fuelectenerg-421	23	15	the	the	DET
fuelectenerg-421	23	16	major	major	ADJ
fuelectenerg-421	23	17	priorities	priority	NOUN
fuelectenerg-421	23	18	as	as	ADV
fuelectenerg-421	23	19	well	well	ADV
fuelectenerg-421	23	20	.	.	PUNCT
fuelectenerg-421	24	1	thus	thus	ADV
fuelectenerg-421	24	2	,	,	PUNCT
fuelectenerg-421	24	3	this	this	DET
fuelectenerg-421	24	4	paper	paper	NOUN
fuelectenerg-421	24	5	presents	present	VERB
fuelectenerg-421	24	6	an	an	DET
fuelectenerg-421	24	7	approach	approach	NOUN
fuelectenerg-421	24	8	based	base	VERB
fuelectenerg-421	24	9	on	on	ADP
fuelectenerg-421	24	10	the	the	DET
fuelectenerg-421	24	11	buffered	buffer	VERB
fuelectenerg-421	24	12	conversion	conversion	NOUN
fuelectenerg-421	24	13	input	input	NOUN
fuelectenerg-421	24	14	stage	stage	NOUN
fuelectenerg-421	24	15	biased	bias	VERB
fuelectenerg-421	24	16	by	by	ADP
fuelectenerg-421	24	17	a	a	DET
fuelectenerg-421	24	18	voltage	voltage	NOUN
fuelectenerg-421	24	19	divider	divider	NOUN
fuelectenerg-421	24	20	that	that	PRON
fuelectenerg-421	24	21	is	be	AUX
fuelectenerg-421	24	22	formed	form	VERB
fuelectenerg-421	24	23	using	use	VERB
fuelectenerg-421	24	24	diode	diode	NOUN
fuelectenerg-421	24	25	-	-	PUNCT
fuelectenerg-421	24	26	connected	connect	VERB
fuelectenerg-421	24	27	mos	mos	NOUN
fuelectenerg-421	24	28	transistors	transistor	NOUN
fuelectenerg-421	24	29	.	.	PUNCT
fuelectenerg-421	25	1	a	a	DET
fuelectenerg-421	25	2	mos	mos	ADJ
fuelectenerg-421	25	3	transistor	transistor	NOUN
fuelectenerg-421	25	4	of	of	ADP
fuelectenerg-421	25	5	small	small	ADJ
fuelectenerg-421	25	6	size	size	NOUN
fuelectenerg-421	25	7	exhibits	exhibit	VERB
fuelectenerg-421	25	8	high	high	ADJ
fuelectenerg-421	25	9	resistance	resistance	NOUN
fuelectenerg-421	25	10	and	and	CCONJ
fuelectenerg-421	25	11	therefore	therefore	ADV
fuelectenerg-421	25	12	,	,	PUNCT
fuelectenerg-421	25	13	such	such	DET
fuelectenerg-421	25	14	a	a	DET
fuelectenerg-421	25	15	voltage	voltage	NOUN
fuelectenerg-421	25	16	divider	divider	NOUN
fuelectenerg-421	25	17	can	can	AUX
fuelectenerg-421	25	18	be	be	AUX
fuelectenerg-421	25	19	connected	connect	VERB
fuelectenerg-421	25	20	to	to	ADP
fuelectenerg-421	25	21	high	high	ADJ
fuelectenerg-421	25	22	impedance	impedance	NOUN
fuelectenerg-421	25	23	node	node	NOUN
fuelectenerg-421	25	24	i.e.	i.e.	X
fuelectenerg-421	25	25	the	the	DET
fuelectenerg-421	25	26	microphone	microphone	NOUN
fuelectenerg-421	25	27	output	output	NOUN
fuelectenerg-421	25	28	.	.	PUNCT
fuelectenerg-421	26	1	this	this	DET
fuelectenerg-421	26	2	solution	solution	NOUN
fuelectenerg-421	26	3	ensures	ensure	VERB
fuelectenerg-421	26	4	reliable	reliable	ADJ
fuelectenerg-421	26	5	dc	dc	PROPN
fuelectenerg-421	26	6	bias	bias	NOUN
fuelectenerg-421	26	7	voltage	voltage	NOUN
fuelectenerg-421	26	8	for	for	ADP
fuelectenerg-421	26	9	an	an	DET
fuelectenerg-421	26	10	input	input	NOUN
fuelectenerg-421	26	11	buffer	buffer	NOUN
fuelectenerg-421	26	12	of	of	ADP
fuelectenerg-421	26	13	the	the	DET
fuelectenerg-421	26	14	readout	readout	NOUN
fuelectenerg-421	26	15	circuit	circuit	NOUN
fuelectenerg-421	26	16	.	.	PUNCT
fuelectenerg-421	27	1	moreover	moreover	ADV
fuelectenerg-421	27	2	,	,	PUNCT
fuelectenerg-421	27	3	with	with	ADP
fuelectenerg-421	27	4	high	high	ADJ
fuelectenerg-421	27	5	-	-	PUNCT
fuelectenerg-421	27	6	resistance	resistance	NOUN
fuelectenerg-421	27	7	mos	mos	NOUN
fuelectenerg-421	27	8	transistors	transistor	NOUN
fuelectenerg-421	27	9	,	,	PUNCT
fuelectenerg-421	27	10	lowfrequency	lowfrequency	ADJ
fuelectenerg-421	27	11	pole	pole	NOUN
fuelectenerg-421	27	12	of	of	ADP
fuelectenerg-421	27	13	the	the	DET
fuelectenerg-421	27	14	mcm	mcm	PROPN
fuelectenerg-421	27	15	with	with	ADP
fuelectenerg-421	27	16	a	a	DET
fuelectenerg-421	27	17	small	small	ADJ
fuelectenerg-421	27	18	value	value	NOUN
fuelectenerg-421	27	19	of	of	ADP
fuelectenerg-421	27	20	the	the	DET
fuelectenerg-421	27	21	nominal	nominal	ADJ
fuelectenerg-421	27	22	capacitance	capacitance	NOUN
fuelectenerg-421	27	23	can	can	AUX
fuelectenerg-421	27	24	be	be	AUX
fuelectenerg-421	27	25	easily	easily	ADV
fuelectenerg-421	27	26	set	set	VERB
fuelectenerg-421	27	27	.	.	PUNCT
fuelectenerg-421	28	1	2	2	X
fuelectenerg-421	28	2	.	.	X
fuelectenerg-421	28	3	preliminary	preliminary	ADJ
fuelectenerg-421	28	4	work	work	NOUN
fuelectenerg-421	28	5	microphone	microphone	NOUN
fuelectenerg-421	28	6	is	be	AUX
fuelectenerg-421	28	7	a	a	DET
fuelectenerg-421	28	8	device	device	NOUN
fuelectenerg-421	28	9	,	,	PUNCT
fuelectenerg-421	28	10	which	which	PRON
fuelectenerg-421	28	11	converts	convert	VERB
fuelectenerg-421	28	12	the	the	DET
fuelectenerg-421	28	13	sound	sound	NOUN
fuelectenerg-421	28	14	into	into	ADP
fuelectenerg-421	28	15	an	an	DET
fuelectenerg-421	28	16	electrical	electrical	ADJ
fuelectenerg-421	28	17	signal	signal	NOUN
fuelectenerg-421	28	18	.	.	PUNCT
fuelectenerg-421	29	1	typical	typical	ADJ
fuelectenerg-421	29	2	structure	structure	NOUN
fuelectenerg-421	29	3	of	of	ADP
fuelectenerg-421	29	4	a	a	DET
fuelectenerg-421	29	5	mems	mem	NOUN
fuelectenerg-421	29	6	capacitive	capacitive	ADJ
fuelectenerg-421	29	7	microphone	microphone	NOUN
fuelectenerg-421	29	8	is	be	AUX
fuelectenerg-421	29	9	shown	show	VERB
fuelectenerg-421	29	10	in	in	ADP
fuelectenerg-421	29	11	fig	fig	NOUN
fuelectenerg-421	29	12	.	.	PUNCT
fuelectenerg-421	30	1	1.acoustic	1.acoustic	ADJ
fuelectenerg-421	30	2	sound	sound	NOUN
fuelectenerg-421	30	3	pressure	pressure	NOUN
fuelectenerg-421	30	4	incident	incident	NOUN
fuelectenerg-421	30	5	the	the	DET
fuelectenerg-421	30	6	diaphragm	diaphragm	NOUN
fuelectenerg-421	30	7	(	(	PUNCT
fuelectenerg-421	30	8	membrane	membrane	NOUN
fuelectenerg-421	30	9	)	)	PUNCT
fuelectenerg-421	30	10	causes	cause	VERB
fuelectenerg-421	30	11	capacitance	capacitance	NOUN
fuelectenerg-421	30	12	changes	change	NOUN
fuelectenerg-421	30	13	of	of	ADP
fuelectenerg-421	30	14	the	the	DET
fuelectenerg-421	30	15	structure	structure	NOUN
fuelectenerg-421	30	16	that	that	PRON
fuelectenerg-421	30	17	is	be	AUX
fuelectenerg-421	30	18	then	then	ADV
fuelectenerg-421	30	19	transformed	transform	VERB
fuelectenerg-421	30	20	into	into	ADP
fuelectenerg-421	30	21	electrical	electrical	ADJ
fuelectenerg-421	30	22	signal	signal	NOUN
fuelectenerg-421	30	23	by	by	ADP
fuelectenerg-421	30	24	the	the	DET
fuelectenerg-421	30	25	readout	readout	NOUN
fuelectenerg-421	30	26	circuit	circuit	NOUN
fuelectenerg-421	30	27	.	.	PUNCT
fuelectenerg-421	31	1	the	the	DET
fuelectenerg-421	31	2	mcm	mcm	PROPN
fuelectenerg-421	31	3	has	have	VERB
fuelectenerg-421	31	4	a	a	DET
fuelectenerg-421	31	5	diaphragm	diaphragm	NOUN
fuelectenerg-421	31	6	and	and	CCONJ
fuelectenerg-421	31	7	cavity	cavity	NOUN
fuelectenerg-421	31	8	like	like	ADP
fuelectenerg-421	31	9	some	some	DET
fuelectenerg-421	31	10	other	other	ADJ
fuelectenerg-421	31	11	mems	mem	NOUN
fuelectenerg-421	31	12	microphones	microphone	NOUN
fuelectenerg-421	31	13	.	.	PUNCT
fuelectenerg-421	32	1	however	however	ADV
fuelectenerg-421	32	2	,	,	PUNCT
fuelectenerg-421	32	3	compared	compare	VERB
fuelectenerg-421	32	4	to	to	ADP
fuelectenerg-421	32	5	other	other	ADJ
fuelectenerg-421	32	6	types	type	NOUN
fuelectenerg-421	32	7	,	,	PUNCT
fuelectenerg-421	32	8	mcms	mcms	PROPN
fuelectenerg-421	32	9	have	have	VERB
fuelectenerg-421	32	10	a	a	DET
fuelectenerg-421	32	11	fixed	fix	VERB
fuelectenerg-421	32	12	and	and	CCONJ
fuelectenerg-421	32	13	porous	porous	ADJ
fuelectenerg-421	32	14	backplate	backplate	NOUN
fuelectenerg-421	32	15	that	that	PRON
fuelectenerg-421	32	16	is	be	AUX
fuelectenerg-421	32	17	separated	separate	VERB
fuelectenerg-421	32	18	from	from	ADP
fuelectenerg-421	32	19	the	the	DET
fuelectenerg-421	32	20	diaphragm	diaphragm	NOUN
fuelectenerg-421	32	21	by	by	ADP
fuelectenerg-421	32	22	the	the	DET
fuelectenerg-421	32	23	air	air	NOUN
fuelectenerg-421	32	24	gap	gap	NOUN
fuelectenerg-421	32	25	.	.	PUNCT
fuelectenerg-421	33	1	the	the	DET
fuelectenerg-421	33	2	backplate	backplate	NOUN
fuelectenerg-421	33	3	holes	hole	NOUN
fuelectenerg-421	33	4	are	be	AUX
fuelectenerg-421	33	5	used	use	VERB
fuelectenerg-421	33	6	to	to	PART
fuelectenerg-421	33	7	tune	tune	VERB
fuelectenerg-421	33	8	the	the	DET
fuelectenerg-421	33	9	bandwidth	bandwidth	ADJ
fuelectenerg-421	33	10	and	and	CCONJ
fuelectenerg-421	33	11	resonance	resonance	NOUN
fuelectenerg-421	33	12	frequency	frequency	NOUN
fuelectenerg-421	33	13	of	of	ADP
fuelectenerg-421	33	14	the	the	DET
fuelectenerg-421	33	15	microphone	microphone	NOUN
fuelectenerg-421	33	16	[	[	X
fuelectenerg-421	33	17	6	6	NUM
fuelectenerg-421	33	18	]	]	PUNCT
fuelectenerg-421	33	19	.	.	PUNCT
fuelectenerg-421	34	1	generally	generally	ADV
fuelectenerg-421	34	2	,	,	PUNCT
fuelectenerg-421	34	3	capacitive	capacitive	ADJ
fuelectenerg-421	34	4	microphone	microphone	NOUN
fuelectenerg-421	34	5	can	can	AUX
fuelectenerg-421	34	6	be	be	AUX
fuelectenerg-421	34	7	classified	classify	VERB
fuelectenerg-421	34	8	as	as	ADP
fuelectenerg-421	34	9	electret	electret	ADJ
fuelectenerg-421	34	10	and	and	CCONJ
fuelectenerg-421	34	11	condensed	condense	VERB
fuelectenerg-421	34	12	.	.	PUNCT
fuelectenerg-421	35	1	electret	electret	PROPN
fuelectenerg-421	35	2	microphones	microphone	NOUN
fuelectenerg-421	35	3	are	be	AUX
fuelectenerg-421	35	4	less	less	ADV
fuelectenerg-421	35	5	used	used	ADJ
fuelectenerg-421	35	6	because	because	SCONJ
fuelectenerg-421	35	7	they	they	PRON
fuelectenerg-421	35	8	are	be	AUX
fuelectenerg-421	35	9	biased	bias	VERB
fuelectenerg-421	35	10	with	with	ADP
fuelectenerg-421	35	11	the	the	DET
fuelectenerg-421	35	12	stable	stable	ADJ
fuelectenerg-421	35	13	embedded	embed	VERB
fuelectenerg-421	35	14	charge	charge	NOUN
fuelectenerg-421	35	15	and	and	CCONJ
fuelectenerg-421	35	16	therefore	therefore	ADV
fuelectenerg-421	35	17	,	,	PUNCT
fuelectenerg-421	35	18	the	the	DET
fuelectenerg-421	35	19	fabrication	fabrication	NOUN
fuelectenerg-421	35	20	is	be	AUX
fuelectenerg-421	35	21	more	more	ADV
fuelectenerg-421	35	22	difficult	difficult	ADJ
fuelectenerg-421	35	23	.	.	PUNCT
fuelectenerg-421	36	1	condensed	condense	VERB
fuelectenerg-421	36	2	microphones	microphone	NOUN
fuelectenerg-421	36	3	are	be	AUX
fuelectenerg-421	36	4	biased	bias	VERB
fuelectenerg-421	36	5	by	by	ADP
fuelectenerg-421	36	6	an	an	DET
fuelectenerg-421	36	7	external	external	ADJ
fuelectenerg-421	36	8	voltage	voltage	NOUN
fuelectenerg-421	36	9	source	source	NOUN
fuelectenerg-421	36	10	,	,	PUNCT
fuelectenerg-421	36	11	which	which	PRON
fuelectenerg-421	36	12	makes	make	VERB
fuelectenerg-421	36	13	them	they	PRON
fuelectenerg-421	36	14	easier	easy	ADJ
fuelectenerg-421	36	15	to	to	PART
fuelectenerg-421	36	16	use	use	VERB
fuelectenerg-421	36	17	.	.	PUNCT
fuelectenerg-421	37	1	accordingly	accordingly	ADV
fuelectenerg-421	37	2	,	,	PUNCT
fuelectenerg-421	37	3	the	the	DET
fuelectenerg-421	37	4	sensitivity	sensitivity	NOUN
fuelectenerg-421	37	5	of	of	ADP
fuelectenerg-421	37	6	the	the	DET
fuelectenerg-421	37	7	capacitive	capacitive	ADJ
fuelectenerg-421	37	8	microphone	microphone	NOUN
fuelectenerg-421	37	9	depends	depend	VERB
fuelectenerg-421	37	10	on	on	ADP
fuelectenerg-421	37	11	the	the	DET
fuelectenerg-421	37	12	size	size	NOUN
fuelectenerg-421	37	13	of	of	ADP
fuelectenerg-421	37	14	the	the	DET
fuelectenerg-421	37	15	membrane	membrane	NOUN
fuelectenerg-421	37	16	as	as	ADV
fuelectenerg-421	37	17	well	well	ADV
fuelectenerg-421	37	18	as	as	ADP
fuelectenerg-421	37	19	on	on	ADP
fuelectenerg-421	37	20	the	the	DET
fuelectenerg-421	37	21	electric	electric	ADJ
fuelectenerg-421	37	22	field	field	NOUN
fuelectenerg-421	37	23	in	in	ADP
fuelectenerg-421	37	24	the	the	DET
fuelectenerg-421	37	25	air	air	NOUN
fuelectenerg-421	37	26	gap	gap	NOUN
fuelectenerg-421	37	27	that	that	PRON
fuelectenerg-421	37	28	is	be	AUX
fuelectenerg-421	37	29	invoked	invoke	VERB
fuelectenerg-421	37	30	by	by	ADP
fuelectenerg-421	37	31	the	the	DET
fuelectenerg-421	37	32	external	external	ADJ
fuelectenerg-421	37	33	voltage	voltage	NOUN
fuelectenerg-421	37	34	source	source	NOUN
fuelectenerg-421	37	35	[	[	X
fuelectenerg-421	37	36	1	1	NUM
fuelectenerg-421	37	37	]	]	PUNCT
fuelectenerg-421	37	38	.	.	PUNCT
fuelectenerg-421	38	1	readout	readout	AUX
fuelectenerg-421	38	2	interface	interface	VERB
fuelectenerg-421	38	3	the	the	DET
fuelectenerg-421	38	4	main	main	ADJ
fuelectenerg-421	38	5	role	role	NOUN
fuelectenerg-421	38	6	of	of	ADP
fuelectenerg-421	38	7	the	the	DET
fuelectenerg-421	38	8	readout	readout	NOUN
fuelectenerg-421	38	9	interface	interface	NOUN
fuelectenerg-421	38	10	(	(	PUNCT
fuelectenerg-421	38	11	ri	ri	NOUN
fuelectenerg-421	38	12	)	)	PUNCT
fuelectenerg-421	38	13	is	be	AUX
fuelectenerg-421	38	14	to	to	PART
fuelectenerg-421	38	15	convert	convert	VERB
fuelectenerg-421	38	16	the	the	DET
fuelectenerg-421	38	17	capacitance	capacitance	NOUN
fuelectenerg-421	38	18	changes	change	NOUN
fuelectenerg-421	38	19	produced	produce	VERB
fuelectenerg-421	38	20	by	by	ADP
fuelectenerg-421	38	21	an	an	DET
fuelectenerg-421	38	22	mcm	mcm	PROPN
fuelectenerg-421	38	23	into	into	ADP
fuelectenerg-421	38	24	electrical	electrical	ADJ
fuelectenerg-421	38	25	signal	signal	NOUN
fuelectenerg-421	38	26	such	such	ADJ
fuelectenerg-421	38	27	as	as	ADP
fuelectenerg-421	38	28	voltage	voltage	NOUN
fuelectenerg-421	38	29	,	,	PUNCT
fuelectenerg-421	38	30	current	current	ADJ
fuelectenerg-421	38	31	,	,	PUNCT
fuelectenerg-421	38	32	etc	etc	X
fuelectenerg-421	38	33	.	.	X
fuelectenerg-421	39	1	in	in	ADP
fuelectenerg-421	39	2	the	the	DET
fuelectenerg-421	39	3	last	last	ADJ
fuelectenerg-421	39	4	years	year	NOUN
fuelectenerg-421	39	5	,	,	PUNCT
fuelectenerg-421	39	6	design	design	NOUN
fuelectenerg-421	39	7	of	of	ADP
fuelectenerg-421	39	8	cmos	cmos	PROPN
fuelectenerg-421	39	9	readout	readout	PROPN
fuelectenerg-421	39	10	frontend	frontend	NOUN
fuelectenerg-421	39	11	circuit	circuit	NOUN
fuelectenerg-421	39	12	for	for	ADP
fuelectenerg-421	39	13	mems	mem	NOUN
fuelectenerg-421	39	14	capacitive	capacitive	ADJ
fuelectenerg-421	39	15	microphones	microphone	NOUN
fuelectenerg-421	39	16	265	265	NUM
fuelectenerg-421	39	17	many	many	ADJ
fuelectenerg-421	39	18	readout	readout	VERB
fuelectenerg-421	39	19	circuits	circuit	NOUN
fuelectenerg-421	39	20	based	base	VERB
fuelectenerg-421	39	21	on	on	ADP
fuelectenerg-421	39	22	the	the	DET
fuelectenerg-421	39	23	capacitive	capacitive	ADJ
fuelectenerg-421	39	24	sensing	sensing	NOUN
fuelectenerg-421	39	25	for	for	ADP
fuelectenerg-421	39	26	mems	mems	ADJ
fuelectenerg-421	39	27	sensors	sensor	NOUN
fuelectenerg-421	39	28	and	and	CCONJ
fuelectenerg-421	39	29	its	its	PRON
fuelectenerg-421	39	30	several	several	ADJ
fuelectenerg-421	39	31	modifications	modification	NOUN
fuelectenerg-421	39	32	have	have	AUX
fuelectenerg-421	39	33	been	be	AUX
fuelectenerg-421	39	34	proposed	propose	VERB
fuelectenerg-421	39	35	[	[	X
fuelectenerg-421	39	36	2,4,7	2,4,7	NUM
fuelectenerg-421	39	37	-	-	SYM
fuelectenerg-421	39	38	11	11	NUM
fuelectenerg-421	39	39	]	]	PUNCT
fuelectenerg-421	39	40	.	.	PUNCT
fuelectenerg-421	40	1	the	the	DET
fuelectenerg-421	40	2	most	most	ADV
fuelectenerg-421	40	3	important	important	ADJ
fuelectenerg-421	40	4	requirements	requirement	NOUN
fuelectenerg-421	40	5	for	for	ADP
fuelectenerg-421	40	6	the	the	DET
fuelectenerg-421	40	7	mcms	mcms	PROPN
fuelectenerg-421	40	8	readout	readout	PROPN
fuelectenerg-421	40	9	interface	interface	NOUN
fuelectenerg-421	40	10	include	include	VERB
fuelectenerg-421	40	11	very	very	ADV
fuelectenerg-421	40	12	high	high	ADJ
fuelectenerg-421	40	13	input	input	NOUN
fuelectenerg-421	40	14	impedance	impedance	NOUN
fuelectenerg-421	40	15	,	,	PUNCT
fuelectenerg-421	40	16	low	low	ADJ
fuelectenerg-421	40	17	offset	offset	NOUN
fuelectenerg-421	40	18	and	and	CCONJ
fuelectenerg-421	40	19	low	low	ADJ
fuelectenerg-421	40	20	noise	noise	NOUN
fuelectenerg-421	40	21	.	.	PUNCT
fuelectenerg-421	41	1	on	on	ADP
fuelectenerg-421	41	2	the	the	DET
fuelectenerg-421	41	3	other	other	ADJ
fuelectenerg-421	41	4	hand	hand	NOUN
fuelectenerg-421	41	5	,	,	PUNCT
fuelectenerg-421	41	6	the	the	DET
fuelectenerg-421	41	7	design	design	NOUN
fuelectenerg-421	41	8	of	of	ADP
fuelectenerg-421	41	9	readout	readout	NOUN
fuelectenerg-421	41	10	circuitry	circuitry	NOUN
fuelectenerg-421	41	11	strongly	strongly	ADV
fuelectenerg-421	41	12	depends	depend	VERB
fuelectenerg-421	41	13	on	on	ADP
fuelectenerg-421	41	14	features	feature	NOUN
fuelectenerg-421	41	15	of	of	ADP
fuelectenerg-421	41	16	the	the	DET
fuelectenerg-421	41	17	mcm	mcm	PROPN
fuelectenerg-421	41	18	but	but	CCONJ
fuelectenerg-421	41	19	it	it	PRON
fuelectenerg-421	41	20	is	be	AUX
fuelectenerg-421	41	21	also	also	ADV
fuelectenerg-421	41	22	determined	determine	VERB
fuelectenerg-421	41	23	by	by	ADP
fuelectenerg-421	41	24	the	the	DET
fuelectenerg-421	41	25	end	end	NOUN
fuelectenerg-421	41	26	application	application	NOUN
fuelectenerg-421	41	27	.	.	PUNCT
fuelectenerg-421	42	1	therefore	therefore	ADV
fuelectenerg-421	42	2	,	,	PUNCT
fuelectenerg-421	42	3	it	it	PRON
fuelectenerg-421	42	4	is	be	AUX
fuelectenerg-421	42	5	not	not	PART
fuelectenerg-421	42	6	easy	easy	ADJ
fuelectenerg-421	42	7	to	to	PART
fuelectenerg-421	42	8	make	make	VERB
fuelectenerg-421	42	9	the	the	DET
fuelectenerg-421	42	10	optimum	optimum	ADJ
fuelectenerg-421	42	11	design	design	NOUN
fuelectenerg-421	42	12	of	of	ADP
fuelectenerg-421	42	13	the	the	DET
fuelectenerg-421	42	14	readout	readout	NOUN
fuelectenerg-421	42	15	circuit	circuit	NOUN
fuelectenerg-421	42	16	,	,	PUNCT
fuelectenerg-421	42	17	which	which	PRON
fuelectenerg-421	42	18	could	could	AUX
fuelectenerg-421	42	19	fulfill	fulfill	VERB
fuelectenerg-421	42	20	all	all	DET
fuelectenerg-421	42	21	the	the	DET
fuelectenerg-421	42	22	requirements	requirement	NOUN
fuelectenerg-421	42	23	.	.	PUNCT
fuelectenerg-421	43	1	in	in	ADP
fuelectenerg-421	43	2	general	general	ADJ
fuelectenerg-421	43	3	,	,	PUNCT
fuelectenerg-421	43	4	there	there	PRON
fuelectenerg-421	43	5	are	be	VERB
fuelectenerg-421	43	6	three	three	NUM
fuelectenerg-421	43	7	basic	basic	ADJ
fuelectenerg-421	43	8	approaches	approach	NOUN
fuelectenerg-421	43	9	(	(	PUNCT
fuelectenerg-421	43	10	based	base	VERB
fuelectenerg-421	43	11	on	on	ADP
fuelectenerg-421	43	12	a	a	DET
fuelectenerg-421	43	13	preamplifier	preamplifier	NOUN
fuelectenerg-421	43	14	)	)	PUNCT
fuelectenerg-421	43	15	to	to	PART
fuelectenerg-421	43	16	readout	readout	VERB
fuelectenerg-421	43	17	circuit	circuit	NOUN
fuelectenerg-421	43	18	topology	topology	NOUN
fuelectenerg-421	43	19	,	,	PUNCT
fuelectenerg-421	43	20	depending	depend	VERB
fuelectenerg-421	43	21	on	on	ADP
fuelectenerg-421	43	22	the	the	DET
fuelectenerg-421	43	23	method	method	NOUN
fuelectenerg-421	43	24	used	use	VERB
fuelectenerg-421	43	25	for	for	ADP
fuelectenerg-421	43	26	the	the	DET
fuelectenerg-421	43	27	microphone	microphone	NOUN
fuelectenerg-421	43	28	capacitance	capacitance	NOUN
fuelectenerg-421	43	29	conversion	conversion	NOUN
fuelectenerg-421	43	30	.	.	PUNCT
fuelectenerg-421	44	1	those	those	PRON
fuelectenerg-421	44	2	are	be	AUX
fuelectenerg-421	44	3	:	:	PUNCT
fuelectenerg-421	44	4	constant	constant	ADJ
fuelectenerg-421	44	5	-	-	PUNCT
fuelectenerg-421	44	6	voltage	voltage	NOUN
fuelectenerg-421	44	7	,	,	PUNCT
fuelectenerg-421	44	8	constant	constant	ADJ
fuelectenerg-421	44	9	-	-	PUNCT
fuelectenerg-421	44	10	charge	charge	NOUN
fuelectenerg-421	44	11	and	and	CCONJ
fuelectenerg-421	44	12	force	force	NOUN
fuelectenerg-421	44	13	-	-	PUNCT
fuelectenerg-421	44	14	feedback	feedback	NOUN
fuelectenerg-421	44	15	approaches	approach	NOUN
fuelectenerg-421	44	16	[	[	X
fuelectenerg-421	44	17	12	12	NUM
fuelectenerg-421	44	18	]	]	PUNCT
fuelectenerg-421	44	19	.	.	PUNCT
fuelectenerg-421	45	1	in	in	ADP
fuelectenerg-421	45	2	continuous	continuous	ADJ
fuelectenerg-421	45	3	time	time	NOUN
fuelectenerg-421	45	4	constant	constant	ADJ
fuelectenerg-421	45	5	-	-	PUNCT
fuelectenerg-421	45	6	voltage	voltage	NOUN
fuelectenerg-421	45	7	approach	approach	NOUN
fuelectenerg-421	45	8	,	,	PUNCT
fuelectenerg-421	45	9	changes	change	NOUN
fuelectenerg-421	45	10	in	in	ADP
fuelectenerg-421	45	11	capacitance	capacitance	NOUN
fuelectenerg-421	45	12	of	of	ADP
fuelectenerg-421	45	13	the	the	DET
fuelectenerg-421	45	14	mcm	mcm	PROPN
fuelectenerg-421	45	15	caused	cause	VERB
fuelectenerg-421	45	16	by	by	ADP
fuelectenerg-421	45	17	acoustic	acoustic	ADJ
fuelectenerg-421	45	18	input	input	NOUN
fuelectenerg-421	45	19	pressure	pressure	NOUN
fuelectenerg-421	45	20	create	create	VERB
fuelectenerg-421	45	21	an	an	DET
fuelectenerg-421	45	22	ac	ac	PROPN
fuelectenerg-421	45	23	current	current	NOUN
fuelectenerg-421	45	24	that	that	PRON
fuelectenerg-421	45	25	can	can	AUX
fuelectenerg-421	45	26	be	be	AUX
fuelectenerg-421	45	27	sensed	sense	VERB
fuelectenerg-421	45	28	using	use	VERB
fuelectenerg-421	45	29	a	a	DET
fuelectenerg-421	45	30	preamplifier	preamplifier	NOUN
fuelectenerg-421	45	31	with	with	ADP
fuelectenerg-421	45	32	extremely	extremely	ADV
fuelectenerg-421	45	33	high	high	ADJ
fuelectenerg-421	45	34	input	input	NOUN
fuelectenerg-421	45	35	impedance	impedance	NOUN
fuelectenerg-421	45	36	so	so	ADV
fuelectenerg-421	45	37	called	call	VERB
fuelectenerg-421	45	38	transimpedance	transimpedance	NOUN
fuelectenerg-421	45	39	amplifier	amplifier	NOUN
fuelectenerg-421	45	40	(	(	PUNCT
fuelectenerg-421	45	41	tia	tia	PROPN
fuelectenerg-421	45	42	)	)	PUNCT
fuelectenerg-421	46	1	[	[	X
fuelectenerg-421	46	2	8	8	NUM
fuelectenerg-421	46	3	]	]	PUNCT
fuelectenerg-421	46	4	.	.	PUNCT
fuelectenerg-421	47	1	in	in	ADP
fuelectenerg-421	47	2	this	this	DET
fuelectenerg-421	47	3	approach	approach	NOUN
fuelectenerg-421	47	4	,	,	PUNCT
fuelectenerg-421	47	5	the	the	DET
fuelectenerg-421	47	6	microphone	microphone	NOUN
fuelectenerg-421	47	7	output	output	NOUN
fuelectenerg-421	47	8	node	node	NOUN
fuelectenerg-421	47	9	tries	try	VERB
fuelectenerg-421	47	10	to	to	PART
fuelectenerg-421	47	11	be	be	AUX
fuelectenerg-421	47	12	maintained	maintain	VERB
fuelectenerg-421	47	13	fixed	fix	VERB
fuelectenerg-421	47	14	(	(	PUNCT
fuelectenerg-421	47	15	termed	term	VERB
fuelectenerg-421	47	16	as	as	ADP
fuelectenerg-421	47	17	the	the	DET
fuelectenerg-421	47	18	dc	dc	PROPN
fuelectenerg-421	47	19	-	-	PUNCT
fuelectenerg-421	47	20	component	component	NOUN
fuelectenerg-421	47	21	of	of	ADP
fuelectenerg-421	47	22	the	the	DET
fuelectenerg-421	47	23	sensor	sensor	NOUN
fuelectenerg-421	47	24	)	)	PUNCT
fuelectenerg-421	47	25	that	that	PRON
fuelectenerg-421	47	26	mitigates	mitigate	VERB
fuelectenerg-421	47	27	the	the	DET
fuelectenerg-421	47	28	influence	influence	NOUN
fuelectenerg-421	47	29	of	of	ADP
fuelectenerg-421	47	30	parasitic	parasitic	ADJ
fuelectenerg-421	47	31	capacitances	capacitance	NOUN
fuelectenerg-421	47	32	.	.	PUNCT
fuelectenerg-421	48	1	this	this	DET
fuelectenerg-421	48	2	results	result	NOUN
fuelectenerg-421	48	3	in	in	ADP
fuelectenerg-421	48	4	the	the	DET
fuelectenerg-421	48	5	transformation	transformation	NOUN
fuelectenerg-421	48	6	of	of	ADP
fuelectenerg-421	48	7	charge	charge	NOUN
fuelectenerg-421	48	8	change(δq	change(δq	PROPN
fuelectenerg-421	48	9	)	)	PUNCT
fuelectenerg-421	48	10	by	by	ADP
fuelectenerg-421	48	11	a	a	DET
fuelectenerg-421	48	12	charge	charge	NOUN
fuelectenerg-421	48	13	preamplifier	preamplifier	NOUN
fuelectenerg-421	48	14	into	into	ADP
fuelectenerg-421	48	15	output	output	NOUN
fuelectenerg-421	48	16	voltage	voltage	NOUN
fuelectenerg-421	48	17	signal	signal	NOUN
fuelectenerg-421	48	18	.	.	PUNCT
fuelectenerg-421	49	1	the	the	DET
fuelectenerg-421	49	2	dc	dc	PROPN
fuelectenerg-421	49	3	biasing	biasing	NOUN
fuelectenerg-421	49	4	of	of	ADP
fuelectenerg-421	49	5	the	the	DET
fuelectenerg-421	49	6	preamplifier	preamplifier	NOUN
fuelectenerg-421	49	7	input	input	NOUN
fuelectenerg-421	49	8	in	in	ADP
fuelectenerg-421	49	9	constantvoltage	constantvoltage	NOUN
fuelectenerg-421	49	10	approach	approach	NOUN
fuelectenerg-421	49	11	is	be	AUX
fuelectenerg-421	49	12	not	not	PART
fuelectenerg-421	49	13	so	so	ADV
fuelectenerg-421	49	14	critical	critical	ADJ
fuelectenerg-421	49	15	,	,	PUNCT
fuelectenerg-421	49	16	and	and	CCONJ
fuelectenerg-421	49	17	also	also	ADV
fuelectenerg-421	49	18	pole	pole	NOUN
fuelectenerg-421	49	19	of	of	ADP
fuelectenerg-421	49	20	high	high	ADJ
fuelectenerg-421	49	21	pass	pass	NOUN
fuelectenerg-421	49	22	filter	filter	NOUN
fuelectenerg-421	49	23	can	can	AUX
fuelectenerg-421	49	24	be	be	AUX
fuelectenerg-421	49	25	localized	localize	VERB
fuelectenerg-421	49	26	more	more	ADV
fuelectenerg-421	49	27	properly	properly	ADV
fuelectenerg-421	49	28	[	[	X
fuelectenerg-421	49	29	12	12	NUM
fuelectenerg-421	49	30	,	,	PUNCT
fuelectenerg-421	49	31	17	17	NUM
fuelectenerg-421	49	32	]	]	PUNCT
fuelectenerg-421	49	33	.	.	PUNCT
fuelectenerg-421	50	1	in	in	ADP
fuelectenerg-421	50	2	[	[	X
fuelectenerg-421	50	3	9	9	NUM
fuelectenerg-421	50	4	]	]	PUNCT
fuelectenerg-421	50	5	,	,	PUNCT
fuelectenerg-421	50	6	this	this	DET
fuelectenerg-421	50	7	approach	approach	NOUN
fuelectenerg-421	50	8	was	be	AUX
fuelectenerg-421	50	9	supported	support	VERB
fuelectenerg-421	50	10	by	by	ADP
fuelectenerg-421	50	11	floating	float	VERB
fuelectenerg-421	50	12	-	-	PUNCT
fuelectenerg-421	50	13	gate	gate	NOUN
fuelectenerg-421	50	14	circuit	circuit	NOUN
fuelectenerg-421	50	15	techniques	technique	NOUN
fuelectenerg-421	50	16	to	to	PART
fuelectenerg-421	50	17	adapt	adapt	VERB
fuelectenerg-421	50	18	the	the	DET
fuelectenerg-421	50	19	charge	charge	NOUN
fuelectenerg-421	50	20	and	and	CCONJ
fuelectenerg-421	50	21	improve	improve	VERB
fuelectenerg-421	50	22	snr	snr	NOUN
fuelectenerg-421	50	23	.	.	PUNCT
fuelectenerg-421	51	1	constant	constant	ADJ
fuelectenerg-421	51	2	-	-	PUNCT
fuelectenerg-421	51	3	voltage	voltage	NOUN
fuelectenerg-421	51	4	approach	approach	NOUN
fuelectenerg-421	51	5	can	can	AUX
fuelectenerg-421	51	6	be	be	AUX
fuelectenerg-421	51	7	also	also	ADV
fuelectenerg-421	51	8	implemented	implement	VERB
fuelectenerg-421	51	9	in	in	ADP
fuelectenerg-421	51	10	the	the	DET
fuelectenerg-421	51	11	discrete	discrete	ADJ
fuelectenerg-421	51	12	form	form	NOUN
fuelectenerg-421	51	13	.	.	PUNCT
fuelectenerg-421	52	1	therefore	therefore	ADV
fuelectenerg-421	52	2	,	,	PUNCT
fuelectenerg-421	52	3	switched	switch	VERB
fuelectenerg-421	52	4	capacitor	capacitor	NOUN
fuelectenerg-421	52	5	(	(	PUNCT
fuelectenerg-421	52	6	sc	sc	PROPN
fuelectenerg-421	52	7	)	)	PUNCT
fuelectenerg-421	52	8	circuits	circuit	NOUN
fuelectenerg-421	52	9	can	can	AUX
fuelectenerg-421	52	10	be	be	AUX
fuelectenerg-421	52	11	also	also	ADV
fuelectenerg-421	52	12	used	use	VERB
fuelectenerg-421	52	13	to	to	PART
fuelectenerg-421	52	14	implement	implement	VERB
fuelectenerg-421	52	15	a	a	DET
fuelectenerg-421	52	16	readout	readout	NOUN
fuelectenerg-421	52	17	circuit	circuit	NOUN
fuelectenerg-421	52	18	for	for	ADP
fuelectenerg-421	52	19	the	the	DET
fuelectenerg-421	52	20	mcms	mcms	NOUN
fuelectenerg-421	53	1	[	[	X
fuelectenerg-421	53	2	2,8	2,8	PROPN
fuelectenerg-421	53	3	]	]	PUNCT
fuelectenerg-421	53	4	.	.	PUNCT
fuelectenerg-421	54	1	using	use	VERB
fuelectenerg-421	54	2	sc	sc	PROPN
fuelectenerg-421	54	3	circuits	circuit	NOUN
fuelectenerg-421	54	4	,	,	PUNCT
fuelectenerg-421	54	5	the	the	DET
fuelectenerg-421	54	6	robust	robust	ADJ
fuelectenerg-421	54	7	dc	dc	PROPN
fuelectenerg-421	54	8	bias	bias	NOUN
fuelectenerg-421	54	9	in	in	ADP
fuelectenerg-421	54	10	the	the	DET
fuelectenerg-421	54	11	sensing	sense	VERB
fuelectenerg-421	54	12	node	node	NOUN
fuelectenerg-421	54	13	can	can	AUX
fuelectenerg-421	54	14	be	be	AUX
fuelectenerg-421	54	15	achieved	achieve	VERB
fuelectenerg-421	54	16	and	and	CCONJ
fuelectenerg-421	54	17	the	the	DET
fuelectenerg-421	54	18	influence	influence	NOUN
fuelectenerg-421	54	19	of	of	ADP
fuelectenerg-421	54	20	the	the	DET
fuelectenerg-421	54	21	mcm	mcm	PROPN
fuelectenerg-421	54	22	parasitic	parasitic	ADJ
fuelectenerg-421	54	23	capacitance	capacitance	NOUN
fuelectenerg-421	54	24	can	can	AUX
fuelectenerg-421	54	25	be	be	AUX
fuelectenerg-421	54	26	reduced	reduce	VERB
fuelectenerg-421	54	27	.	.	PUNCT
fuelectenerg-421	55	1	low	low	ADJ
fuelectenerg-421	55	2	input	input	NOUN
fuelectenerg-421	55	3	offset	offset	NOUN
fuelectenerg-421	55	4	can	can	AUX
fuelectenerg-421	55	5	be	be	AUX
fuelectenerg-421	55	6	achieved	achieve	VERB
fuelectenerg-421	55	7	by	by	ADP
fuelectenerg-421	55	8	employing	employ	VERB
fuelectenerg-421	55	9	the	the	DET
fuelectenerg-421	55	10	offset	offset	NOUN
fuelectenerg-421	55	11	reduction	reduction	NOUN
fuelectenerg-421	55	12	techniques	technique	NOUN
fuelectenerg-421	55	13	used	use	VERB
fuelectenerg-421	55	14	for	for	ADP
fuelectenerg-421	55	15	sc	sc	PROPN
fuelectenerg-421	55	16	circuits	circuit	NOUN
fuelectenerg-421	55	17	like	like	ADP
fuelectenerg-421	55	18	autozero	autozero	PROPN
fuelectenerg-421	55	19	,	,	PUNCT
fuelectenerg-421	55	20	correlated	correlate	VERB
fuelectenerg-421	55	21	double	double	ADJ
fuelectenerg-421	55	22	sampling	sampling	NOUN
fuelectenerg-421	55	23	or	or	CCONJ
fuelectenerg-421	55	24	chopper	chopper	NOUN
fuelectenerg-421	55	25	stabilization	stabilization	NOUN
fuelectenerg-421	55	26	technique	technique	NOUN
fuelectenerg-421	55	27	[	[	X
fuelectenerg-421	55	28	18	18	NUM
fuelectenerg-421	55	29	-	-	SYM
fuelectenerg-421	55	30	20	20	NUM
fuelectenerg-421	55	31	]	]	PUNCT
fuelectenerg-421	55	32	.	.	PUNCT
fuelectenerg-421	56	1	however	however	ADV
fuelectenerg-421	56	2	,	,	PUNCT
fuelectenerg-421	56	3	the	the	DET
fuelectenerg-421	56	4	main	main	ADJ
fuelectenerg-421	56	5	disadvantage	disadvantage	NOUN
fuelectenerg-421	56	6	of	of	ADP
fuelectenerg-421	56	7	a	a	DET
fuelectenerg-421	56	8	sc	sc	PROPN
fuelectenerg-421	56	9	readout	readout	NOUN
fuelectenerg-421	56	10	circuit	circuit	NOUN
fuelectenerg-421	56	11	is	be	AUX
fuelectenerg-421	56	12	thermal	thermal	ADJ
fuelectenerg-421	56	13	noise	noise	NOUN
fuelectenerg-421	56	14	of	of	ADP
fuelectenerg-421	56	15	the	the	DET
fuelectenerg-421	56	16	switches	switch	NOUN
fuelectenerg-421	56	17	,	,	PUNCT
fuelectenerg-421	56	18	kt	kt	PROPN
fuelectenerg-421	56	19	/	/	SYM
fuelectenerg-421	56	20	c	c	PROPN
fuelectenerg-421	56	21	noise	noise	NOUN
fuelectenerg-421	56	22	caused	cause	VERB
fuelectenerg-421	56	23	by	by	ADP
fuelectenerg-421	56	24	sampling	sample	VERB
fuelectenerg-421	56	25	capacitors	capacitor	NOUN
fuelectenerg-421	56	26	as	as	ADV
fuelectenerg-421	56	27	well	well	ADV
fuelectenerg-421	56	28	as	as	ADP
fuelectenerg-421	56	29	noise	noise	NOUN
fuelectenerg-421	56	30	produced	produce	VERB
fuelectenerg-421	56	31	by	by	ADP
fuelectenerg-421	56	32	sampling	sample	VERB
fuelectenerg-421	56	33	process	process	NOUN
fuelectenerg-421	56	34	itself	itself	PRON
fuelectenerg-421	56	35	.	.	PUNCT
fuelectenerg-421	57	1	better	well	ADJ
fuelectenerg-421	57	2	noise	noise	NOUN
fuelectenerg-421	57	3	performance	performance	NOUN
fuelectenerg-421	57	4	can	can	AUX
fuelectenerg-421	57	5	be	be	AUX
fuelectenerg-421	57	6	achieved	achieve	VERB
fuelectenerg-421	57	7	with	with	ADP
fuelectenerg-421	57	8	constant	constant	ADJ
fuelectenerg-421	57	9	-	-	PUNCT
fuelectenerg-421	57	10	charge	charge	NOUN
fuelectenerg-421	57	11	approach	approach	NOUN
fuelectenerg-421	57	12	based	base	VERB
fuelectenerg-421	57	13	on	on	ADP
fuelectenerg-421	57	14	an	an	DET
fuelectenerg-421	57	15	impedance	impedance	NOUN
fuelectenerg-421	57	16	conversion	conversion	NOUN
fuelectenerg-421	57	17	buffer	buffer	NOUN
fuelectenerg-421	57	18	,	,	PUNCT
fuelectenerg-421	57	19	where	where	SCONJ
fuelectenerg-421	57	20	the	the	DET
fuelectenerg-421	57	21	capacitance	capacitance	NOUN
fuelectenerg-421	57	22	change	change	NOUN
fuelectenerg-421	57	23	is	be	AUX
fuelectenerg-421	57	24	converted	convert	VERB
fuelectenerg-421	57	25	into	into	ADP
fuelectenerg-421	57	26	a	a	DET
fuelectenerg-421	57	27	voltage	voltage	NOUN
fuelectenerg-421	57	28	signal	signal	NOUN
fuelectenerg-421	57	29	by	by	ADP
fuelectenerg-421	57	30	proper	proper	ADJ
fuelectenerg-421	57	31	biasing	biasing	NOUN
fuelectenerg-421	57	32	of	of	ADP
fuelectenerg-421	57	33	the	the	DET
fuelectenerg-421	57	34	mcm	mcm	PROPN
fuelectenerg-421	57	35	.	.	PUNCT
fuelectenerg-421	58	1	however	however	ADV
fuelectenerg-421	58	2	,	,	PUNCT
fuelectenerg-421	58	3	in	in	ADP
fuelectenerg-421	58	4	this	this	DET
fuelectenerg-421	58	5	approach	approach	NOUN
fuelectenerg-421	58	6	,	,	PUNCT
fuelectenerg-421	58	7	high	high	ADJ
fuelectenerg-421	58	8	impedance	impedance	NOUN
fuelectenerg-421	58	9	of	of	ADP
fuelectenerg-421	58	10	the	the	DET
fuelectenerg-421	58	11	preamplifier	preamplifier	NOUN
fuelectenerg-421	58	12	dramatically	dramatically	ADV
fuelectenerg-421	58	13	influences	influence	VERB
fuelectenerg-421	58	14	the	the	DET
fuelectenerg-421	58	15	frequency	frequency	NOUN
fuelectenerg-421	58	16	band	band	NOUN
fuelectenerg-421	58	17	and	and	CCONJ
fuelectenerg-421	58	18	stray	stray	VERB
fuelectenerg-421	58	19	impedance	impedance	NOUN
fuelectenerg-421	58	20	of	of	ADP
fuelectenerg-421	58	21	the	the	DET
fuelectenerg-421	58	22	mcm	mcm	PROPN
fuelectenerg-421	58	23	and	and	CCONJ
fuelectenerg-421	58	24	also	also	ADV
fuelectenerg-421	58	25	attenuates	attenuate	VERB
fuelectenerg-421	58	26	the	the	DET
fuelectenerg-421	58	27	microphone	microphone	NOUN
fuelectenerg-421	58	28	sensitivity	sensitivity	NOUN
fuelectenerg-421	58	29	.	.	PUNCT
fuelectenerg-421	59	1	nevertheless	nevertheless	ADV
fuelectenerg-421	59	2	,	,	PUNCT
fuelectenerg-421	59	3	the	the	DET
fuelectenerg-421	59	4	effect	effect	NOUN
fuelectenerg-421	59	5	of	of	ADP
fuelectenerg-421	59	6	interconnects	interconnect	NOUN
fuelectenerg-421	59	7	and	and	CCONJ
fuelectenerg-421	59	8	parasitic	parasitic	ADJ
fuelectenerg-421	59	9	capacitances	capacitance	NOUN
fuelectenerg-421	59	10	can	can	AUX
fuelectenerg-421	59	11	be	be	AUX
fuelectenerg-421	59	12	reduced	reduce	VERB
fuelectenerg-421	59	13	by	by	ADP
fuelectenerg-421	59	14	bootstrapping	bootstrappe	VERB
fuelectenerg-421	59	15	[	[	X
fuelectenerg-421	59	16	12	12	NUM
fuelectenerg-421	59	17	-	-	SYM
fuelectenerg-421	59	18	13	13	NUM
fuelectenerg-421	59	19	]	]	PUNCT
fuelectenerg-421	59	20	.	.	PUNCT
fuelectenerg-421	60	1	preamplifier	preamplifier	NOUN
fuelectenerg-421	60	2	offset	offset	NOUN
fuelectenerg-421	60	3	also	also	ADV
fuelectenerg-421	60	4	belongs	belong	VERB
fuelectenerg-421	60	5	to	to	ADP
fuelectenerg-421	60	6	critical	critical	ADJ
fuelectenerg-421	60	7	features	feature	NOUN
fuelectenerg-421	60	8	of	of	ADP
fuelectenerg-421	60	9	this	this	DET
fuelectenerg-421	60	10	approach	approach	NOUN
fuelectenerg-421	60	11	.	.	PUNCT
fuelectenerg-421	61	1	despite	despite	SCONJ
fuelectenerg-421	61	2	these	these	DET
fuelectenerg-421	61	3	disadvantages	disadvantage	NOUN
fuelectenerg-421	61	4	,	,	PUNCT
fuelectenerg-421	61	5	constant	constant	ADJ
fuelectenerg-421	61	6	-	-	PUNCT
fuelectenerg-421	61	7	charge	charge	NOUN
fuelectenerg-421	61	8	approach	approach	NOUN
fuelectenerg-421	61	9	still	still	ADV
fuelectenerg-421	61	10	remains	remain	VERB
fuelectenerg-421	61	11	popular	popular	ADJ
fuelectenerg-421	61	12	[	[	X
fuelectenerg-421	61	13	14	14	NUM
fuelectenerg-421	61	14	-	-	SYM
fuelectenerg-421	61	15	16	16	NUM
fuelectenerg-421	61	16	]	]	PUNCT
fuelectenerg-421	61	17	.	.	PUNCT
fuelectenerg-421	62	1	however	however	ADV
fuelectenerg-421	62	2	,	,	PUNCT
fuelectenerg-421	62	3	the	the	DET
fuelectenerg-421	62	4	key	key	ADJ
fuelectenerg-421	62	5	challenge	challenge	NOUN
fuelectenerg-421	62	6	in	in	ADP
fuelectenerg-421	62	7	this	this	DET
fuelectenerg-421	62	8	technique	technique	NOUN
fuelectenerg-421	62	9	is	be	AUX
fuelectenerg-421	62	10	setting	set	VERB
fuelectenerg-421	62	11	the	the	DET
fuelectenerg-421	62	12	dc	dc	PROPN
fuelectenerg-421	62	13	bias	bias	NOUN
fuelectenerg-421	62	14	voltage	voltage	NOUN
fuelectenerg-421	62	15	at	at	ADP
fuelectenerg-421	62	16	the	the	DET
fuelectenerg-421	62	17	mcm	mcm	PROPN
fuelectenerg-421	62	18	output	output	NOUN
fuelectenerg-421	62	19	(	(	PUNCT
fuelectenerg-421	62	20	represents	represent	VERB
fuelectenerg-421	62	21	the	the	DET
fuelectenerg-421	62	22	very	very	ADV
fuelectenerg-421	62	23	high	high	ADJ
fuelectenerg-421	62	24	impedance	impedance	NOUN
fuelectenerg-421	62	25	node	node	NOUN
fuelectenerg-421	62	26	)	)	PUNCT
fuelectenerg-421	62	27	.	.	PUNCT
fuelectenerg-421	63	1	approaches	approach	NOUN
fuelectenerg-421	63	2	presented	present	VERB
fuelectenerg-421	63	3	in	in	ADP
fuelectenerg-421	63	4	[	[	PUNCT
fuelectenerg-421	63	5	21	21	NUM
fuelectenerg-421	63	6	-	-	SYM
fuelectenerg-421	63	7	22	22	NUM
fuelectenerg-421	63	8	]	]	PUNCT
fuelectenerg-421	63	9	uses	use	VERB
fuelectenerg-421	63	10	diodes	diode	NOUN
fuelectenerg-421	63	11	and	and	CCONJ
fuelectenerg-421	63	12	a	a	DET
fuelectenerg-421	63	13	unity	unity	NOUN
fuelectenerg-421	63	14	gain	gain	NOUN
fuelectenerg-421	63	15	ota	ota	PROPN
fuelectenerg-421	63	16	(	(	PUNCT
fuelectenerg-421	63	17	operational	operational	ADJ
fuelectenerg-421	63	18	transconductance	transconductance	NOUN
fuelectenerg-421	63	19	amplifier	amplifier	NOUN
fuelectenerg-421	63	20	)	)	PUNCT
fuelectenerg-421	63	21	for	for	ADP
fuelectenerg-421	63	22	dc	dc	PROPN
fuelectenerg-421	63	23	biasing	biasing	NOUN
fuelectenerg-421	63	24	and	and	CCONJ
fuelectenerg-421	63	25	for	for	ADP
fuelectenerg-421	63	26	current	current	ADJ
fuelectenerg-421	63	27	to	to	PART
fuelectenerg-421	63	28	voltage	voltage	VERB
fuelectenerg-421	63	29	conversion	conversion	NOUN
fuelectenerg-421	63	30	.	.	PUNCT
fuelectenerg-421	64	1	force	force	NOUN
fuelectenerg-421	64	2	-	-	PUNCT
fuelectenerg-421	64	3	feedback	feedback	NOUN
fuelectenerg-421	64	4	approach	approach	NOUN
fuelectenerg-421	64	5	has	have	AUX
fuelectenerg-421	64	6	been	be	AUX
fuelectenerg-421	64	7	commonly	commonly	ADV
fuelectenerg-421	64	8	used	use	VERB
fuelectenerg-421	64	9	to	to	PART
fuelectenerg-421	64	10	minimize	minimize	VERB
fuelectenerg-421	64	11	the	the	DET
fuelectenerg-421	64	12	impact	impact	NOUN
fuelectenerg-421	64	13	of	of	ADP
fuelectenerg-421	64	14	mechanical	mechanical	ADJ
fuelectenerg-421	64	15	imperfections	imperfection	NOUN
fuelectenerg-421	64	16	and	and	CCONJ
fuelectenerg-421	64	17	inherent	inherent	ADJ
fuelectenerg-421	64	18	non	non	NOUN
fuelectenerg-421	64	19	-	-	NOUN
fuelectenerg-421	64	20	linearities	linearity	NOUN
fuelectenerg-421	64	21	in	in	ADP
fuelectenerg-421	64	22	mems	mem	NOUN
fuelectenerg-421	64	23	capacitive	capacitive	ADJ
fuelectenerg-421	64	24	sensors	sensor	NOUN
fuelectenerg-421	64	25	through	through	ADP
fuelectenerg-421	64	26	close	close	ADJ
fuelectenerg-421	64	27	-	-	PUNCT
fuelectenerg-421	64	28	loop	loop	NOUN
fuelectenerg-421	64	29	bias	bias	NOUN
fuelectenerg-421	64	30	voltage	voltage	NOUN
fuelectenerg-421	64	31	tuning	tune	VERB
fuelectenerg-421	64	32	[	[	X
fuelectenerg-421	64	33	14	14	NUM
fuelectenerg-421	64	34	,	,	PUNCT
fuelectenerg-421	64	35	23	23	NUM
fuelectenerg-421	64	36	]	]	PUNCT
fuelectenerg-421	64	37	.	.	PUNCT
fuelectenerg-421	65	1	a	a	DET
fuelectenerg-421	65	2	feedback	feedback	NOUN
fuelectenerg-421	65	3	loop	loop	NOUN
fuelectenerg-421	65	4	can	can	AUX
fuelectenerg-421	65	5	be	be	AUX
fuelectenerg-421	65	6	successfully	successfully	ADV
fuelectenerg-421	65	7	exploited	exploit	VERB
fuelectenerg-421	65	8	for	for	ADP
fuelectenerg-421	65	9	offset	offset	ADJ
fuelectenerg-421	65	10	cancellation	cancellation	NOUN
fuelectenerg-421	65	11	and	and	CCONJ
fuelectenerg-421	65	12	the	the	DET
fuelectenerg-421	65	13	dynamic	dynamic	ADJ
fuelectenerg-421	65	14	range	range	NOUN
fuelectenerg-421	65	15	enhancement	enhancement	NOUN
fuelectenerg-421	65	16	[	[	X
fuelectenerg-421	65	17	24	24	NUM
fuelectenerg-421	65	18	-	-	SYM
fuelectenerg-421	65	19	25	25	NUM
fuelectenerg-421	65	20	]	]	PUNCT
fuelectenerg-421	65	21	.	.	PUNCT
fuelectenerg-421	66	1	the	the	DET
fuelectenerg-421	66	2	reset	reset	NOUN
fuelectenerg-421	66	3	noise	noise	NOUN
fuelectenerg-421	66	4	reduction	reduction	NOUN
fuelectenerg-421	66	5	schemes	scheme	NOUN
fuelectenerg-421	66	6	[	[	X
fuelectenerg-421	66	7	26	26	NUM
fuelectenerg-421	66	8	]	]	PUNCT
fuelectenerg-421	66	9	also	also	ADV
fuelectenerg-421	66	10	include	include	VERB
fuelectenerg-421	66	11	a	a	DET
fuelectenerg-421	66	12	feedback	feedback	NOUN
fuelectenerg-421	66	13	loop	loop	NOUN
fuelectenerg-421	66	14	that	that	PRON
fuelectenerg-421	66	15	either	either	CCONJ
fuelectenerg-421	66	16	cancels	cancel	VERB
fuelectenerg-421	66	17	the	the	DET
fuelectenerg-421	66	18	reset	reset	NOUN
fuelectenerg-421	66	19	noise	noise	NOUN
fuelectenerg-421	66	20	or	or	CCONJ
fuelectenerg-421	66	21	reduces	reduce	VERB
fuelectenerg-421	66	22	the	the	DET
fuelectenerg-421	66	23	bandwidth	bandwidth	NOUN
fuelectenerg-421	66	24	of	of	ADP
fuelectenerg-421	66	25	noise	noise	NOUN
fuelectenerg-421	66	26	or	or	CCONJ
fuelectenerg-421	66	27	controls	control	VERB
fuelectenerg-421	66	28	the	the	DET
fuelectenerg-421	66	29	reset	reset	NOUN
fuelectenerg-421	66	30	process	process	NOUN
fuelectenerg-421	66	31	itself	itself	PRON
fuelectenerg-421	66	32	.	.	PUNCT
fuelectenerg-421	67	1	interesting	interesting	ADJ
fuelectenerg-421	67	2	concept	concept	NOUN
fuelectenerg-421	67	3	was	be	AUX
fuelectenerg-421	67	4	presented	present	VERB
fuelectenerg-421	67	5	in	in	ADP
fuelectenerg-421	67	6	[	[	X
fuelectenerg-421	67	7	27	27	NUM
fuelectenerg-421	67	8	]	]	PUNCT
fuelectenerg-421	67	9	,	,	PUNCT
fuelectenerg-421	67	10	where	where	SCONJ
fuelectenerg-421	67	11	electro	electro	VERB
fuelectenerg-421	67	12	-	-	PUNCT
fuelectenerg-421	67	13	mechanic	mechanic	ADJ
fuelectenerg-421	67	14	feedback	feedback	NOUN
fuelectenerg-421	67	15	incorporates	incorporate	VERB
fuelectenerg-421	67	16	a	a	DET
fuelectenerg-421	67	17	triangle	triangle	NOUN
fuelectenerg-421	67	18	voltage	voltage	NOUN
fuelectenerg-421	67	19	wave	wave	NOUN
fuelectenerg-421	67	20	generator	generator	PROPN
fuelectenerg-421	67	21	.	.	PUNCT
fuelectenerg-421	68	1	in	in	ADP
fuelectenerg-421	68	2	combination	combination	NOUN
fuelectenerg-421	68	3	with	with	ADP
fuelectenerg-421	68	4	the	the	DET
fuelectenerg-421	68	5	constant	constant	ADJ
fuelectenerg-421	68	6	-	-	PUNCT
fuelectenerg-421	68	7	voltage	voltage	NOUN
fuelectenerg-421	68	8	approach	approach	NOUN
fuelectenerg-421	68	9	and	and	CCONJ
fuelectenerg-421	68	10	transimpedance	transimpedance	NOUN
fuelectenerg-421	68	11	amplifier	amplifier	NOUN
fuelectenerg-421	68	12	,	,	PUNCT
fuelectenerg-421	68	13	high	high	ADJ
fuelectenerg-421	68	14	266	266	NUM
fuelectenerg-421	68	15	d.	d.	PROPN
fuelectenerg-421	68	16	arbet	arbet	PROPN
fuelectenerg-421	68	17	,	,	PUNCT
fuelectenerg-421	68	18	v.	v.	ADP
fuelectenerg-421	68	19	stopjaková	stopjaková	PROPN
fuelectenerg-421	68	20	,	,	PUNCT
fuelectenerg-421	68	21	m.	m.	NOUN
fuelectenerg-421	68	22	kováč	kováč	PROPN
fuelectenerg-421	68	23	,	,	PUNCT
fuelectenerg-421	68	24	l.	l.	PROPN
fuelectenerg-421	68	25	nagy	nagy	PROPN
fuelectenerg-421	68	26	,	,	PUNCT
fuelectenerg-421	68	27	g.	g.	PROPN
fuelectenerg-421	68	28	nagy	nagy	PROPN
fuelectenerg-421	68	29	dynamic	dynamic	ADJ
fuelectenerg-421	68	30	range	range	NOUN
fuelectenerg-421	68	31	was	be	AUX
fuelectenerg-421	68	32	achieved	achieve	VERB
fuelectenerg-421	68	33	.	.	PUNCT
fuelectenerg-421	69	1	however	however	ADV
fuelectenerg-421	69	2	,	,	PUNCT
fuelectenerg-421	69	3	the	the	DET
fuelectenerg-421	69	4	power	power	NOUN
fuelectenerg-421	69	5	consumption	consumption	NOUN
fuelectenerg-421	69	6	,	,	PUNCT
fuelectenerg-421	69	7	sensitivity	sensitivity	NOUN
fuelectenerg-421	69	8	,	,	PUNCT
fuelectenerg-421	69	9	a	a	DET
fuelectenerg-421	69	10	range	range	NOUN
fuelectenerg-421	69	11	of	of	ADP
fuelectenerg-421	69	12	capacitance	capacitance	NOUN
fuelectenerg-421	69	13	variation	variation	NOUN
fuelectenerg-421	69	14	and	and	CCONJ
fuelectenerg-421	69	15	lower	low	ADJ
fuelectenerg-421	69	16	limit	limit	NOUN
fuelectenerg-421	69	17	of	of	ADP
fuelectenerg-421	69	18	sense	sense	NOUN
fuelectenerg-421	69	19	capacitance	capacitance	NOUN
fuelectenerg-421	69	20	make	make	VERB
fuelectenerg-421	69	21	this	this	DET
fuelectenerg-421	69	22	readout	readout	NOUN
fuelectenerg-421	69	23	design	design	VERB
fuelectenerg-421	69	24	impractical	impractical	ADJ
fuelectenerg-421	69	25	for	for	ADP
fuelectenerg-421	69	26	mems	mems	ADJ
fuelectenerg-421	69	27	microphones	microphone	NOUN
fuelectenerg-421	69	28	.	.	PUNCT
fuelectenerg-421	70	1	this	this	DET
fuelectenerg-421	70	2	concept	concept	NOUN
fuelectenerg-421	70	3	belongs	belong	VERB
fuelectenerg-421	70	4	to	to	ADP
fuelectenerg-421	70	5	the	the	DET
fuelectenerg-421	70	6	semi	semi	ADJ
fuelectenerg-421	70	7	-	-	ADJ
fuelectenerg-421	70	8	digital	digital	ADJ
fuelectenerg-421	70	9	methods	method	NOUN
fuelectenerg-421	70	10	that	that	PRON
fuelectenerg-421	70	11	encode	encode	VERB
fuelectenerg-421	70	12	the	the	DET
fuelectenerg-421	70	13	information	information	NOUN
fuelectenerg-421	70	14	either	either	CCONJ
fuelectenerg-421	70	15	in	in	ADP
fuelectenerg-421	70	16	time	time	NOUN
fuelectenerg-421	70	17	(	(	PUNCT
fuelectenerg-421	70	18	pulse	pulse	NOUN
fuelectenerg-421	70	19	-	-	PUNCT
fuelectenerg-421	70	20	width	width	NOUN
fuelectenerg-421	70	21	modulation	modulation	NOUN
fuelectenerg-421	70	22	)	)	PUNCT
fuelectenerg-421	70	23	or	or	CCONJ
fuelectenerg-421	70	24	frequency	frequency	NOUN
fuelectenerg-421	70	25	(	(	PUNCT
fuelectenerg-421	70	26	pulsefrequency	pulsefrequency	NOUN
fuelectenerg-421	70	27	modulation	modulation	NOUN
fuelectenerg-421	70	28	)	)	PUNCT
fuelectenerg-421	70	29	domain	domain	NOUN
fuelectenerg-421	70	30	.	.	PUNCT
fuelectenerg-421	71	1	therefore	therefore	ADV
fuelectenerg-421	71	2	,	,	PUNCT
fuelectenerg-421	71	3	main	main	ADJ
fuelectenerg-421	71	4	advantages	advantage	NOUN
fuelectenerg-421	71	5	include	include	VERB
fuelectenerg-421	71	6	broad	broad	ADJ
fuelectenerg-421	71	7	dynamic	dynamic	ADJ
fuelectenerg-421	71	8	range	range	NOUN
fuelectenerg-421	71	9	,	,	PUNCT
fuelectenerg-421	71	10	low	low	ADJ
fuelectenerg-421	71	11	power	power	NOUN
fuelectenerg-421	71	12	consumption	consumption	NOUN
fuelectenerg-421	71	13	and	and	CCONJ
fuelectenerg-421	71	14	robustness	robustness	NOUN
fuelectenerg-421	71	15	against	against	ADP
fuelectenerg-421	71	16	the	the	DET
fuelectenerg-421	71	17	environmental	environmental	ADJ
fuelectenerg-421	71	18	noise	noise	NOUN
fuelectenerg-421	71	19	.	.	PUNCT
fuelectenerg-421	72	1	however	however	ADV
fuelectenerg-421	72	2	,	,	PUNCT
fuelectenerg-421	72	3	the	the	DET
fuelectenerg-421	72	4	vast	vast	ADJ
fuelectenerg-421	72	5	majority	majority	NOUN
fuelectenerg-421	72	6	of	of	ADP
fuelectenerg-421	72	7	realizations	realization	NOUN
fuelectenerg-421	72	8	do	do	AUX
fuelectenerg-421	72	9	not	not	PART
fuelectenerg-421	72	10	meet	meet	VERB
fuelectenerg-421	72	11	the	the	DET
fuelectenerg-421	72	12	readout	readout	NOUN
fuelectenerg-421	72	13	circuit	circuit	NOUN
fuelectenerg-421	72	14	requirements	requirement	NOUN
fuelectenerg-421	72	15	for	for	ADP
fuelectenerg-421	72	16	mems	mem	NOUN
fuelectenerg-421	72	17	microphones[22	microphones[22	NOUN
fuelectenerg-421	72	18	-	-	PUNCT
fuelectenerg-421	72	19	27	27	NUM
fuelectenerg-421	72	20	]	]	PUNCT
fuelectenerg-421	72	21	.	.	PUNCT
fuelectenerg-421	73	1	this	this	DET
fuelectenerg-421	73	2	paper	paper	NOUN
fuelectenerg-421	73	3	presents	present	VERB
fuelectenerg-421	73	4	a	a	DET
fuelectenerg-421	73	5	novel	novel	ADJ
fuelectenerg-421	73	6	constant	constant	ADJ
fuelectenerg-421	73	7	-	-	PUNCT
fuelectenerg-421	73	8	charge	charge	NOUN
fuelectenerg-421	73	9	approach	approach	NOUN
fuelectenerg-421	73	10	,	,	PUNCT
fuelectenerg-421	73	11	where	where	SCONJ
fuelectenerg-421	73	12	the	the	DET
fuelectenerg-421	73	13	voltage	voltage	NOUN
fuelectenerg-421	73	14	divider	divider	NOUN
fuelectenerg-421	73	15	based	base	VERB
fuelectenerg-421	73	16	on	on	ADP
fuelectenerg-421	73	17	diode	diode	NOUN
fuelectenerg-421	73	18	-	-	PUNCT
fuelectenerg-421	73	19	connected	connect	VERB
fuelectenerg-421	73	20	mos	mos	NOUN
fuelectenerg-421	73	21	transistor	transistor	NOUN
fuelectenerg-421	73	22	is	be	AUX
fuelectenerg-421	73	23	used	use	VERB
fuelectenerg-421	73	24	for	for	ADP
fuelectenerg-421	73	25	dc	dc	PROPN
fuelectenerg-421	73	26	biasing	biasing	NOUN
fuelectenerg-421	73	27	of	of	ADP
fuelectenerg-421	73	28	the	the	DET
fuelectenerg-421	73	29	input	input	NOUN
fuelectenerg-421	73	30	conversion	conversion	PROPN
fuelectenerg-421	73	31	lna	lna	PROPN
fuelectenerg-421	73	32	(	(	PUNCT
fuelectenerg-421	73	33	low	low	ADJ
fuelectenerg-421	73	34	noise	noise	NOUN
fuelectenerg-421	73	35	amplifier	amplifier	NOUN
fuelectenerg-421	73	36	)	)	PUNCT
fuelectenerg-421	73	37	buffer	buffer	NOUN
fuelectenerg-421	73	38	.	.	PUNCT
fuelectenerg-421	74	1	advantage	advantage	NOUN
fuelectenerg-421	74	2	of	of	ADP
fuelectenerg-421	74	3	this	this	DET
fuelectenerg-421	74	4	approach	approach	NOUN
fuelectenerg-421	74	5	is	be	AUX
fuelectenerg-421	74	6	that	that	SCONJ
fuelectenerg-421	74	7	the	the	DET
fuelectenerg-421	74	8	highresistance	highresistance	NOUN
fuelectenerg-421	74	9	voltage	voltage	NOUN
fuelectenerg-421	74	10	divider	divider	NOUN
fuelectenerg-421	74	11	does	do	AUX
fuelectenerg-421	74	12	not	not	PART
fuelectenerg-421	74	13	affect	affect	VERB
fuelectenerg-421	74	14	the	the	DET
fuelectenerg-421	74	15	high	high	ADJ
fuelectenerg-421	74	16	output	output	NOUN
fuelectenerg-421	74	17	impedance	impedance	NOUN
fuelectenerg-421	74	18	of	of	ADP
fuelectenerg-421	74	19	the	the	DET
fuelectenerg-421	74	20	mcm	mcm	PROPN
fuelectenerg-421	74	21	,	,	PUNCT
fuelectenerg-421	74	22	and	and	CCONJ
fuelectenerg-421	74	23	also	also	ADV
fuelectenerg-421	74	24	the	the	DET
fuelectenerg-421	74	25	pole	pole	NOUN
fuelectenerg-421	74	26	of	of	ADP
fuelectenerg-421	74	27	high	high	ADJ
fuelectenerg-421	74	28	pass	pass	NOUN
fuelectenerg-421	74	29	filter	filter	NOUN
fuelectenerg-421	74	30	can	can	AUX
fuelectenerg-421	74	31	be	be	AUX
fuelectenerg-421	74	32	easy	easy	ADV
fuelectenerg-421	74	33	localized	localize	VERB
fuelectenerg-421	74	34	.	.	PUNCT
fuelectenerg-421	75	1	3	3	X
fuelectenerg-421	75	2	.	.	NUM
fuelectenerg-421	75	3	proposed	propose	VERB
fuelectenerg-421	75	4	readout	readout	PROPN
fuelectenerg-421	75	5	frontend	frontend	NOUN
fuelectenerg-421	75	6	circuit	circuit	NOUN
fuelectenerg-421	75	7	3.1	3.1	NUM
fuelectenerg-421	75	8	.	.	PUNCT
fuelectenerg-421	76	1	the	the	DET
fuelectenerg-421	76	2	whole	whole	ADJ
fuelectenerg-421	76	3	ri	ri	NOUN
fuelectenerg-421	76	4	concept	concept	VERB
fuelectenerg-421	76	5	the	the	DET
fuelectenerg-421	76	6	principal	principal	ADJ
fuelectenerg-421	76	7	scheme	scheme	NOUN
fuelectenerg-421	76	8	of	of	ADP
fuelectenerg-421	76	9	the	the	DET
fuelectenerg-421	76	10	proposed	propose	VERB
fuelectenerg-421	76	11	ri	ri	NOUN
fuelectenerg-421	76	12	is	be	AUX
fuelectenerg-421	76	13	shown	show	VERB
fuelectenerg-421	76	14	in	in	ADP
fuelectenerg-421	76	15	fig	fig	NOUN
fuelectenerg-421	76	16	.	.	PUNCT
fuelectenerg-421	77	1	1	1	X
fuelectenerg-421	77	2	.	.	PUNCT
fuelectenerg-421	77	3	the	the	DET
fuelectenerg-421	77	4	proposed	propose	VERB
fuelectenerg-421	77	5	readout	readout	NOUN
fuelectenerg-421	77	6	approach	approach	NOUN
fuelectenerg-421	77	7	is	be	AUX
fuelectenerg-421	77	8	based	base	VERB
fuelectenerg-421	77	9	on	on	ADP
fuelectenerg-421	77	10	the	the	DET
fuelectenerg-421	77	11	buffered	buffer	VERB
fuelectenerg-421	77	12	conversion	conversion	NOUN
fuelectenerg-421	77	13	input	input	NOUN
fuelectenerg-421	77	14	stage	stage	NOUN
fuelectenerg-421	77	15	.	.	PUNCT
fuelectenerg-421	78	1	whole	whole	ADJ
fuelectenerg-421	78	2	ri	ri	PROPN
fuelectenerg-421	78	3	was	be	AUX
fuelectenerg-421	78	4	designed	design	VERB
fuelectenerg-421	78	5	in	in	ADP
fuelectenerg-421	78	6	a	a	DET
fuelectenerg-421	78	7	standard	standard	ADJ
fuelectenerg-421	78	8	0.35	0.35	NUM
fuelectenerg-421	78	9	m	m	PROPN
fuelectenerg-421	78	10	cmos	cmos	NOUN
fuelectenerg-421	78	11	technology	technology	NOUN
fuelectenerg-421	78	12	,	,	PUNCT
fuelectenerg-421	78	13	with	with	ADP
fuelectenerg-421	78	14	the	the	DET
fuelectenerg-421	78	15	supply	supply	NOUN
fuelectenerg-421	78	16	voltage	voltage	NOUN
fuelectenerg-421	78	17	of	of	ADP
fuelectenerg-421	78	18	3v	3v	NUM
fuelectenerg-421	78	19	.	.	PUNCT
fuelectenerg-421	79	1	generally	generally	ADV
fuelectenerg-421	79	2	,	,	PUNCT
fuelectenerg-421	79	3	the	the	DET
fuelectenerg-421	79	4	readout	readout	NOUN
fuelectenerg-421	79	5	interface	interface	NOUN
fuelectenerg-421	79	6	for	for	ADP
fuelectenerg-421	79	7	mcms	mcms	NOUN
fuelectenerg-421	79	8	can	can	AUX
fuelectenerg-421	79	9	be	be	AUX
fuelectenerg-421	79	10	divided	divide	VERB
fuelectenerg-421	79	11	into	into	ADP
fuelectenerg-421	79	12	two	two	NUM
fuelectenerg-421	79	13	main	main	ADJ
fuelectenerg-421	79	14	parts	part	NOUN
fuelectenerg-421	79	15	frontend	frontend	VERB
fuelectenerg-421	79	16	part	part	NOUN
fuelectenerg-421	79	17	and	and	CCONJ
fuelectenerg-421	79	18	backend	backend	NOUN
fuelectenerg-421	79	19	section	section	NOUN
fuelectenerg-421	79	20	.	.	PUNCT
fuelectenerg-421	80	1	in	in	ADP
fuelectenerg-421	80	2	our	our	PRON
fuelectenerg-421	80	3	case	case	NOUN
fuelectenerg-421	80	4	,	,	PUNCT
fuelectenerg-421	80	5	the	the	DET
fuelectenerg-421	80	6	frontend	frontend	NOUN
fuelectenerg-421	80	7	part	part	NOUN
fuelectenerg-421	80	8	consists	consist	VERB
fuelectenerg-421	80	9	of	of	ADP
fuelectenerg-421	80	10	the	the	DET
fuelectenerg-421	80	11	impedance	impedance	NOUN
fuelectenerg-421	80	12	conversion	conversion	NOUN
fuelectenerg-421	80	13	buffer	buffer	NOUN
fuelectenerg-421	80	14	(	(	PUNCT
fuelectenerg-421	80	15	input	input	NOUN
fuelectenerg-421	80	16	conversion	conversion	NOUN
fuelectenerg-421	80	17	bock	bock	NOUN
fuelectenerg-421	80	18	)	)	PUNCT
fuelectenerg-421	80	19	,	,	PUNCT
fuelectenerg-421	80	20	preamplifier	preamplifier	NOUN
fuelectenerg-421	80	21	and	and	CCONJ
fuelectenerg-421	80	22	filters	filter	NOUN
fuelectenerg-421	80	23	while	while	SCONJ
fuelectenerg-421	80	24	the	the	DET
fuelectenerg-421	80	25	sigma	sigma	PROPN
fuelectenerg-421	80	26	-	-	PUNCT
fuelectenerg-421	80	27	delta	delta	NOUN
fuelectenerg-421	80	28	modulator	modulator	NOUN
fuelectenerg-421	80	29	,	,	PUNCT
fuelectenerg-421	80	30	which	which	PRON
fuelectenerg-421	80	31	converts	convert	VERB
fuelectenerg-421	80	32	the	the	DET
fuelectenerg-421	80	33	output	output	NOUN
fuelectenerg-421	80	34	of	of	ADP
fuelectenerg-421	80	35	the	the	DET
fuelectenerg-421	80	36	frontend	frontend	NOUN
fuelectenerg-421	80	37	circuitry	circuitry	NOUN
fuelectenerg-421	80	38	into	into	ADP
fuelectenerg-421	80	39	a	a	DET
fuelectenerg-421	80	40	digital	digital	ADJ
fuelectenerg-421	80	41	form	form	NOUN
fuelectenerg-421	80	42	,	,	PUNCT
fuelectenerg-421	80	43	represents	represent	VERB
fuelectenerg-421	80	44	the	the	DET
fuelectenerg-421	80	45	backend	backend	ADJ
fuelectenerg-421	80	46	part	part	NOUN
fuelectenerg-421	80	47	of	of	ADP
fuelectenerg-421	80	48	the	the	DET
fuelectenerg-421	80	49	ri	ri	PROPN
fuelectenerg-421	80	50	.	.	PROPN
fuelectenerg-421	80	51	fig	fig	PROPN
fuelectenerg-421	80	52	.	.	PUNCT
fuelectenerg-421	81	1	1	1	NUM
fuelectenerg-421	81	2	concept	concept	NOUN
fuelectenerg-421	81	3	of	of	ADP
fuelectenerg-421	81	4	the	the	DET
fuelectenerg-421	81	5	proposed	propose	VERB
fuelectenerg-421	81	6	ri	ri	NOUN
fuelectenerg-421	81	7	in	in	ADP
fuelectenerg-421	81	8	this	this	DET
fuelectenerg-421	81	9	paper	paper	NOUN
fuelectenerg-421	81	10	,	,	PUNCT
fuelectenerg-421	81	11	we	we	PRON
fuelectenerg-421	81	12	present	present	VERB
fuelectenerg-421	81	13	the	the	DET
fuelectenerg-421	81	14	frontend	frontend	NOUN
fuelectenerg-421	81	15	part	part	NOUN
fuelectenerg-421	81	16	of	of	ADP
fuelectenerg-421	81	17	the	the	DET
fuelectenerg-421	81	18	proposed	propose	VERB
fuelectenerg-421	81	19	ri	ri	PROPN
fuelectenerg-421	81	20	.	.	PUNCT
fuelectenerg-421	82	1	because	because	SCONJ
fuelectenerg-421	82	2	of	of	ADP
fuelectenerg-421	82	3	high	high	ADJ
fuelectenerg-421	82	4	output	output	NOUN
fuelectenerg-421	82	5	impedance	impedance	NOUN
fuelectenerg-421	82	6	of	of	ADP
fuelectenerg-421	82	7	the	the	DET
fuelectenerg-421	82	8	mcm	mcm	PROPN
fuelectenerg-421	82	9	,	,	PUNCT
fuelectenerg-421	82	10	a	a	DET
fuelectenerg-421	82	11	buffer	buffer	NOUN
fuelectenerg-421	82	12	with	with	ADP
fuelectenerg-421	82	13	low	low	ADJ
fuelectenerg-421	82	14	output	output	NOUN
fuelectenerg-421	82	15	impedance	impedance	NOUN
fuelectenerg-421	82	16	has	have	AUX
fuelectenerg-421	82	17	been	be	AUX
fuelectenerg-421	82	18	connected	connect	VERB
fuelectenerg-421	82	19	to	to	ADP
fuelectenerg-421	82	20	the	the	DET
fuelectenerg-421	82	21	microphone	microphone	NOUN
fuelectenerg-421	82	22	’s	’s	PART
fuelectenerg-421	82	23	output	output	NOUN
fuelectenerg-421	82	24	.	.	PUNCT
fuelectenerg-421	83	1	capacitance	capacitance	NOUN
fuelectenerg-421	83	2	variation	variation	NOUN
fuelectenerg-421	83	3	at	at	ADP
fuelectenerg-421	83	4	the	the	DET
fuelectenerg-421	83	5	mcm	mcm	PROPN
fuelectenerg-421	83	6	output	output	NOUN
fuelectenerg-421	83	7	is	be	AUX
fuelectenerg-421	83	8	converted	convert	VERB
fuelectenerg-421	83	9	into	into	ADP
fuelectenerg-421	83	10	voltage	voltage	NOUN
fuelectenerg-421	83	11	using	use	VERB
fuelectenerg-421	83	12	so	so	ADV
fuelectenerg-421	83	13	-	-	PUNCT
fuelectenerg-421	83	14	called	call	VERB
fuelectenerg-421	83	15	sensing	sense	VERB
fuelectenerg-421	83	16	element	element	NOUN
fuelectenerg-421	83	17	that	that	PRON
fuelectenerg-421	83	18	is	be	AUX
fuelectenerg-421	83	19	followed	follow	VERB
fuelectenerg-421	83	20	by	by	ADP
fuelectenerg-421	83	21	the	the	DET
fuelectenerg-421	83	22	input	input	NOUN
fuelectenerg-421	83	23	buffer	buffer	NOUN
fuelectenerg-421	83	24	.	.	PUNCT
fuelectenerg-421	84	1	the	the	DET
fuelectenerg-421	84	2	sensing	sense	VERB
fuelectenerg-421	84	3	element	element	NOUN
fuelectenerg-421	84	4	has	have	AUX
fuelectenerg-421	84	5	been	be	AUX
fuelectenerg-421	84	6	also	also	ADV
fuelectenerg-421	84	7	used	use	VERB
fuelectenerg-421	84	8	to	to	PART
fuelectenerg-421	84	9	ensure	ensure	VERB
fuelectenerg-421	84	10	the	the	DET
fuelectenerg-421	84	11	dc	dc	PROPN
fuelectenerg-421	84	12	bias	bias	NOUN
fuelectenerg-421	84	13	voltage	voltage	NOUN
fuelectenerg-421	84	14	for	for	ADP
fuelectenerg-421	84	15	the	the	DET
fuelectenerg-421	84	16	input	input	NOUN
fuelectenerg-421	84	17	buffer	buffer	NOUN
fuelectenerg-421	84	18	.	.	PUNCT
fuelectenerg-421	85	1	in	in	ADP
fuelectenerg-421	85	2	general	general	ADJ
fuelectenerg-421	85	3	,	,	PUNCT
fuelectenerg-421	85	4	the	the	DET
fuelectenerg-421	85	5	input	input	NOUN
fuelectenerg-421	85	6	buffer	buffer	NOUN
fuelectenerg-421	85	7	can	can	AUX
fuelectenerg-421	85	8	be	be	AUX
fuelectenerg-421	85	9	implemented	implement	VERB
fuelectenerg-421	85	10	using	use	VERB
fuelectenerg-421	85	11	a	a	DET
fuelectenerg-421	85	12	source	source	NOUN
fuelectenerg-421	85	13	follower	follower	NOUN
fuelectenerg-421	85	14	,	,	PUNCT
fuelectenerg-421	85	15	a	a	DET
fuelectenerg-421	85	16	common	common	ADJ
fuelectenerg-421	85	17	-	-	PUNCT
fuelectenerg-421	85	18	gate	gate	NOUN
fuelectenerg-421	85	19	amplifier	amplifier	NOUN
fuelectenerg-421	85	20	or	or	CCONJ
fuelectenerg-421	85	21	an	an	DET
fuelectenerg-421	85	22	operational	operational	ADJ
fuelectenerg-421	85	23	amplifier	amplifier	NOUN
fuelectenerg-421	85	24	(	(	PUNCT
fuelectenerg-421	85	25	opamp	opamp	NOUN
fuelectenerg-421	85	26	)	)	PUNCT
fuelectenerg-421	85	27	based	base	VERB
fuelectenerg-421	85	28	voltage	voltage	NOUN
fuelectenerg-421	85	29	follower	follower	NOUN
fuelectenerg-421	85	30	.	.	PUNCT
fuelectenerg-421	86	1	in	in	ADP
fuelectenerg-421	86	2	our	our	PRON
fuelectenerg-421	86	3	case	case	NOUN
fuelectenerg-421	86	4	,	,	PUNCT
fuelectenerg-421	86	5	a	a	DET
fuelectenerg-421	86	6	simple	simple	ADJ
fuelectenerg-421	86	7	two	two	NUM
fuelectenerg-421	86	8	stage	stage	NOUN
fuelectenerg-421	86	9	opamp	opamp	NOUN
fuelectenerg-421	86	10	connected	connect	VERB
fuelectenerg-421	86	11	as	as	ADP
fuelectenerg-421	86	12	a	a	DET
fuelectenerg-421	86	13	voltage	voltage	NOUN
fuelectenerg-421	86	14	follower	follower	NOUN
fuelectenerg-421	86	15	was	be	AUX
fuelectenerg-421	86	16	used	use	VERB
fuelectenerg-421	86	17	.	.	PUNCT
fuelectenerg-421	87	1	design	design	NOUN
fuelectenerg-421	87	2	of	of	ADP
fuelectenerg-421	87	3	cmos	cmos	PROPN
fuelectenerg-421	87	4	readout	readout	PROPN
fuelectenerg-421	87	5	frontend	frontend	NOUN
fuelectenerg-421	87	6	circuit	circuit	NOUN
fuelectenerg-421	87	7	for	for	ADP
fuelectenerg-421	87	8	mems	mem	NOUN
fuelectenerg-421	87	9	capacitive	capacitive	ADJ
fuelectenerg-421	87	10	microphones	microphone	NOUN
fuelectenerg-421	87	11	267	267	NUM
fuelectenerg-421	87	12	usually	usually	ADV
fuelectenerg-421	87	13	,	,	PUNCT
fuelectenerg-421	87	14	the	the	DET
fuelectenerg-421	87	15	sensing	sense	VERB
fuelectenerg-421	87	16	element	element	NOUN
fuelectenerg-421	87	17	requires	require	VERB
fuelectenerg-421	87	18	high	high	ADJ
fuelectenerg-421	87	19	resistance	resistance	NOUN
fuelectenerg-421	87	20	and	and	CCONJ
fuelectenerg-421	87	21	therefore	therefore	ADV
fuelectenerg-421	87	22	,	,	PUNCT
fuelectenerg-421	87	23	it	it	PRON
fuelectenerg-421	87	24	is	be	AUX
fuelectenerg-421	87	25	implemented	implement	VERB
fuelectenerg-421	87	26	by	by	ADP
fuelectenerg-421	87	27	a	a	DET
fuelectenerg-421	87	28	diode	diode	NOUN
fuelectenerg-421	87	29	-	-	PUNCT
fuelectenerg-421	87	30	connected	connect	VERB
fuelectenerg-421	87	31	mos	mos	NOUN
fuelectenerg-421	87	32	transistor	transistor	NOUN
fuelectenerg-421	87	33	or	or	CCONJ
fuelectenerg-421	87	34	by	by	ADP
fuelectenerg-421	87	35	a	a	DET
fuelectenerg-421	87	36	diode	diode	NOUN
fuelectenerg-421	87	37	in	in	ADP
fuelectenerg-421	87	38	the	the	DET
fuelectenerg-421	87	39	reverse	reverse	ADJ
fuelectenerg-421	87	40	direction	direction	NOUN
fuelectenerg-421	87	41	.	.	PUNCT
fuelectenerg-421	88	1	the	the	DET
fuelectenerg-421	88	2	sensing	sense	VERB
fuelectenerg-421	88	3	element	element	NOUN
fuelectenerg-421	88	4	is	be	AUX
fuelectenerg-421	88	5	the	the	DET
fuelectenerg-421	88	6	most	most	ADV
fuelectenerg-421	88	7	critical	critical	ADJ
fuelectenerg-421	88	8	part	part	NOUN
fuelectenerg-421	88	9	of	of	ADP
fuelectenerg-421	88	10	the	the	DET
fuelectenerg-421	88	11	ri	ri	NOUN
fuelectenerg-421	88	12	because	because	SCONJ
fuelectenerg-421	88	13	several	several	ADJ
fuelectenerg-421	88	14	significant	significant	ADJ
fuelectenerg-421	88	15	parameters	parameter	NOUN
fuelectenerg-421	88	16	(	(	PUNCT
fuelectenerg-421	88	17	e.g.	e.g.	ADV
fuelectenerg-421	88	18	sensitivity	sensitivity	NOUN
fuelectenerg-421	88	19	,	,	PUNCT
fuelectenerg-421	88	20	low	low	ADJ
fuelectenerg-421	88	21	corner	corner	NOUN
fuelectenerg-421	88	22	frequency	frequency	NOUN
fuelectenerg-421	88	23	,	,	PUNCT
fuelectenerg-421	88	24	dc	dc	PROPN
fuelectenerg-421	88	25	bias	bias	PROPN
fuelectenerg-421	88	26	voltage	voltage	NOUN
fuelectenerg-421	88	27	,	,	PUNCT
fuelectenerg-421	88	28	etc	etc	X
fuelectenerg-421	88	29	.	.	X
fuelectenerg-421	88	30	)	)	PUNCT
fuelectenerg-421	88	31	of	of	ADP
fuelectenerg-421	88	32	the	the	DET
fuelectenerg-421	88	33	microphone	microphone	NOUN
fuelectenerg-421	88	34	can	can	AUX
fuelectenerg-421	88	35	be	be	AUX
fuelectenerg-421	88	36	affected	affect	VERB
fuelectenerg-421	88	37	by	by	ADP
fuelectenerg-421	88	38	its	its	PRON
fuelectenerg-421	88	39	properties	property	NOUN
fuelectenerg-421	88	40	.	.	PUNCT
fuelectenerg-421	89	1	output	output	NOUN
fuelectenerg-421	89	2	signal	signal	NOUN
fuelectenerg-421	89	3	from	from	ADP
fuelectenerg-421	89	4	the	the	DET
fuelectenerg-421	89	5	input	input	NOUN
fuelectenerg-421	89	6	buffer	buffer	NOUN
fuelectenerg-421	89	7	is	be	AUX
fuelectenerg-421	89	8	then	then	ADV
fuelectenerg-421	89	9	converted	convert	VERB
fuelectenerg-421	89	10	into	into	ADP
fuelectenerg-421	89	11	a	a	DET
fuelectenerg-421	89	12	differential	differential	ADJ
fuelectenerg-421	89	13	form	form	NOUN
fuelectenerg-421	89	14	to	to	PART
fuelectenerg-421	89	15	improve	improve	VERB
fuelectenerg-421	89	16	noise	noise	NOUN
fuelectenerg-421	89	17	immunity	immunity	NOUN
fuelectenerg-421	89	18	and	and	CCONJ
fuelectenerg-421	89	19	consequently	consequently	ADV
fuelectenerg-421	89	20	,	,	PUNCT
fuelectenerg-421	89	21	the	the	DET
fuelectenerg-421	89	22	differential	differential	ADJ
fuelectenerg-421	89	23	signal	signal	NOUN
fuelectenerg-421	89	24	is	be	AUX
fuelectenerg-421	89	25	amplified	amplify	VERB
fuelectenerg-421	89	26	.	.	PUNCT
fuelectenerg-421	90	1	since	since	SCONJ
fuelectenerg-421	90	2	the	the	DET
fuelectenerg-421	90	3	low	low	ADJ
fuelectenerg-421	90	4	corner	corner	NOUN
fuelectenerg-421	90	5	frequency	frequency	NOUN
fuelectenerg-421	90	6	of	of	ADP
fuelectenerg-421	90	7	the	the	DET
fuelectenerg-421	90	8	ri	ri	PROPN
fuelectenerg-421	90	9	is	be	AUX
fuelectenerg-421	90	10	set	set	VERB
fuelectenerg-421	90	11	to	to	ADP
fuelectenerg-421	90	12	30hz	30hz	ADJ
fuelectenerg-421	90	13	,	,	PUNCT
fuelectenerg-421	90	14	two	two	NUM
fuelectenerg-421	90	15	external	external	ADJ
fuelectenerg-421	90	16	(	(	PUNCT
fuelectenerg-421	90	17	off	off	ADP
fuelectenerg-421	90	18	-	-	PUNCT
fuelectenerg-421	90	19	chip	chip	NOUN
fuelectenerg-421	90	20	)	)	PUNCT
fuelectenerg-421	90	21	capacitors	capacitor	NOUN
fuelectenerg-421	90	22	(	(	PUNCT
fuelectenerg-421	90	23	with	with	ADP
fuelectenerg-421	90	24	capacitance	capacitance	NOUN
fuelectenerg-421	90	25	in	in	ADP
fuelectenerg-421	90	26	order	order	NOUN
fuelectenerg-421	90	27	of	of	ADP
fuelectenerg-421	90	28	hundreds	hundred	NOUN
fuelectenerg-421	90	29	of	of	ADP
fuelectenerg-421	90	30	nf	nf	INTJ
fuelectenerg-421	90	31	)	)	PUNCT
fuelectenerg-421	90	32	are	be	AUX
fuelectenerg-421	90	33	employed	employ	VERB
fuelectenerg-421	90	34	to	to	PART
fuelectenerg-421	90	35	implement	implement	VERB
fuelectenerg-421	90	36	the	the	DET
fuelectenerg-421	90	37	high	high	ADJ
fuelectenerg-421	90	38	-	-	PUNCT
fuelectenerg-421	90	39	pass	pass	NOUN
fuelectenerg-421	90	40	filter	filter	NOUN
fuelectenerg-421	90	41	(	(	PUNCT
fuelectenerg-421	90	42	hpf	hpf	NOUN
fuelectenerg-421	90	43	)	)	PUNCT
fuelectenerg-421	90	44	with	with	ADP
fuelectenerg-421	90	45	the	the	DET
fuelectenerg-421	90	46	slope	slope	NOUN
fuelectenerg-421	90	47	of	of	ADP
fuelectenerg-421	90	48	20	20	NUM
fuelectenerg-421	90	49	db	db	NOUN
fuelectenerg-421	90	50	per	per	ADP
fuelectenerg-421	90	51	decade	decade	NOUN
fuelectenerg-421	90	52	.	.	PUNCT
fuelectenerg-421	91	1	the	the	DET
fuelectenerg-421	91	2	active	active	ADJ
fuelectenerg-421	91	3	low	low	ADJ
fuelectenerg-421	91	4	-	-	PUNCT
fuelectenerg-421	91	5	pass	pass	NOUN
fuelectenerg-421	91	6	filter	filter	NOUN
fuelectenerg-421	91	7	(	(	PUNCT
fuelectenerg-421	91	8	lpf	lpf	PROPN
fuelectenerg-421	91	9	)	)	PUNCT
fuelectenerg-421	91	10	with	with	ADP
fuelectenerg-421	91	11	the	the	DET
fuelectenerg-421	91	12	slope	slope	NOUN
fuelectenerg-421	91	13	of	of	ADP
fuelectenerg-421	91	14	40	40	NUM
fuelectenerg-421	91	15	db	db	NOUN
fuelectenerg-421	91	16	/	/	SYM
fuelectenerg-421	91	17	decade	decade	NOUN
fuelectenerg-421	91	18	is	be	AUX
fuelectenerg-421	91	19	realized	realize	VERB
fuelectenerg-421	91	20	completely	completely	ADV
fuelectenerg-421	91	21	on	on	ADP
fuelectenerg-421	91	22	a	a	DET
fuelectenerg-421	91	23	chip	chip	NOUN
fuelectenerg-421	91	24	.	.	PUNCT
fuelectenerg-421	92	1	consequently	consequently	ADV
fuelectenerg-421	92	2	,	,	PUNCT
fuelectenerg-421	92	3	the	the	DET
fuelectenerg-421	92	4	output	output	NOUN
fuelectenerg-421	92	5	signal	signal	NOUN
fuelectenerg-421	92	6	from	from	ADP
fuelectenerg-421	92	7	the	the	DET
fuelectenerg-421	92	8	lpf	lpf	PROPN
fuelectenerg-421	92	9	is	be	AUX
fuelectenerg-421	92	10	buffered	buffer	VERB
fuelectenerg-421	92	11	and	and	CCONJ
fuelectenerg-421	92	12	processed	process	VERB
fuelectenerg-421	92	13	by	by	ADP
fuelectenerg-421	92	14	the	the	DET
fuelectenerg-421	92	15	sigma	sigma	PROPN
fuelectenerg-421	92	16	-	-	PUNCT
fuelectenerg-421	92	17	delta	delta	NOUN
fuelectenerg-421	92	18	modulator	modulator	NOUN
fuelectenerg-421	92	19	.	.	PUNCT
fuelectenerg-421	93	1	3.2	3.2	NUM
fuelectenerg-421	93	2	.	.	PUNCT
fuelectenerg-421	94	1	input	input	NOUN
fuelectenerg-421	94	2	conversion	conversion	NOUN
fuelectenerg-421	94	3	block	block	NOUN
fuelectenerg-421	94	4	the	the	DET
fuelectenerg-421	94	5	most	most	ADV
fuelectenerg-421	94	6	important	important	ADJ
fuelectenerg-421	94	7	building	building	NOUN
fuelectenerg-421	94	8	block	block	NOUN
fuelectenerg-421	94	9	of	of	ADP
fuelectenerg-421	94	10	the	the	DET
fuelectenerg-421	94	11	proposed	propose	VERB
fuelectenerg-421	94	12	ri	ri	PROPN
fuelectenerg-421	94	13	is	be	AUX
fuelectenerg-421	94	14	the	the	DET
fuelectenerg-421	94	15	input	input	NOUN
fuelectenerg-421	94	16	conversion	conversion	NOUN
fuelectenerg-421	94	17	block	block	NOUN
fuelectenerg-421	94	18	.	.	PUNCT
fuelectenerg-421	95	1	its	its	PRON
fuelectenerg-421	95	2	main	main	ADJ
fuelectenerg-421	95	3	role	role	NOUN
fuelectenerg-421	95	4	is	be	AUX
fuelectenerg-421	95	5	to	to	PART
fuelectenerg-421	95	6	convert	convert	VERB
fuelectenerg-421	95	7	the	the	DET
fuelectenerg-421	95	8	capacitance	capacitance	NOUN
fuelectenerg-421	95	9	variations	variation	NOUN
fuelectenerg-421	95	10	into	into	ADP
fuelectenerg-421	95	11	voltage	voltage	NOUN
fuelectenerg-421	95	12	changes	change	NOUN
fuelectenerg-421	95	13	.	.	PUNCT
fuelectenerg-421	96	1	transistor	transistor	NOUN
fuelectenerg-421	96	2	level	level	NOUN
fuelectenerg-421	96	3	schematic	schematic	ADJ
fuelectenerg-421	96	4	of	of	ADP
fuelectenerg-421	96	5	the	the	DET
fuelectenerg-421	96	6	designed	design	VERB
fuelectenerg-421	96	7	input	input	NOUN
fuelectenerg-421	96	8	conversion	conversion	NOUN
fuelectenerg-421	96	9	block	block	NOUN
fuelectenerg-421	96	10	as	as	ADV
fuelectenerg-421	96	11	well	well	ADV
fuelectenerg-421	96	12	as	as	ADP
fuelectenerg-421	96	13	size	size	NOUN
fuelectenerg-421	96	14	of	of	ADP
fuelectenerg-421	96	15	the	the	DET
fuelectenerg-421	96	16	transistors	transistor	NOUN
fuelectenerg-421	96	17	used	use	VERB
fuelectenerg-421	96	18	in	in	ADP
fuelectenerg-421	96	19	the	the	DET
fuelectenerg-421	96	20	input	input	NOUN
fuelectenerg-421	96	21	buffer	buffer	NOUN
fuelectenerg-421	96	22	are	be	AUX
fuelectenerg-421	96	23	depicted	depict	VERB
fuelectenerg-421	96	24	in	in	ADP
fuelectenerg-421	96	25	fig	fig	NOUN
fuelectenerg-421	96	26	.	.	PUNCT
fuelectenerg-421	97	1	2	2	X
fuelectenerg-421	97	2	.	.	X
fuelectenerg-421	97	3	fig	fig	NOUN
fuelectenerg-421	97	4	.	.	PUNCT
fuelectenerg-421	98	1	2	2	NUM
fuelectenerg-421	98	2	schematic	schematic	ADJ
fuelectenerg-421	98	3	diagram	diagram	NOUN
fuelectenerg-421	98	4	of	of	ADP
fuelectenerg-421	98	5	the	the	DET
fuelectenerg-421	98	6	input	input	NOUN
fuelectenerg-421	98	7	conversion	conversion	NOUN
fuelectenerg-421	98	8	block	block	NOUN
fuelectenerg-421	98	9	the	the	DET
fuelectenerg-421	98	10	proposed	propose	VERB
fuelectenerg-421	98	11	readout	readout	NOUN
fuelectenerg-421	98	12	approach	approach	NOUN
fuelectenerg-421	98	13	is	be	AUX
fuelectenerg-421	98	14	based	base	VERB
fuelectenerg-421	98	15	on	on	ADP
fuelectenerg-421	98	16	the	the	DET
fuelectenerg-421	98	17	buffered	buffer	VERB
fuelectenerg-421	98	18	input	input	NOUN
fuelectenerg-421	98	19	conversion	conversion	NOUN
fuelectenerg-421	98	20	stage	stage	NOUN
fuelectenerg-421	98	21	,	,	PUNCT
fuelectenerg-421	98	22	where	where	SCONJ
fuelectenerg-421	98	23	the	the	DET
fuelectenerg-421	98	24	main	main	ADJ
fuelectenerg-421	98	25	challenge	challenge	NOUN
fuelectenerg-421	98	26	is	be	AUX
fuelectenerg-421	98	27	how	how	SCONJ
fuelectenerg-421	98	28	to	to	PART
fuelectenerg-421	98	29	ensure	ensure	VERB
fuelectenerg-421	98	30	the	the	DET
fuelectenerg-421	98	31	dc	dc	PROPN
fuelectenerg-421	98	32	bias	bias	NOUN
fuelectenerg-421	98	33	voltage	voltage	NOUN
fuelectenerg-421	98	34	for	for	ADP
fuelectenerg-421	98	35	the	the	DET
fuelectenerg-421	98	36	input	input	NOUN
fuelectenerg-421	98	37	buffer	buffer	NOUN
fuelectenerg-421	98	38	.	.	PUNCT
fuelectenerg-421	99	1	since	since	SCONJ
fuelectenerg-421	99	2	the	the	DET
fuelectenerg-421	99	3	output	output	NOUN
fuelectenerg-421	99	4	impedance	impedance	NOUN
fuelectenerg-421	99	5	of	of	ADP
fuelectenerg-421	99	6	the	the	DET
fuelectenerg-421	99	7	mcm	mcm	PROPN
fuelectenerg-421	99	8	is	be	AUX
fuelectenerg-421	99	9	very	very	ADV
fuelectenerg-421	99	10	high	high	ADJ
fuelectenerg-421	99	11	,	,	PUNCT
fuelectenerg-421	99	12	another	another	DET
fuelectenerg-421	99	13	important	important	ADJ
fuelectenerg-421	99	14	task	task	NOUN
fuelectenerg-421	99	15	is	be	AUX
fuelectenerg-421	99	16	to	to	PART
fuelectenerg-421	99	17	maintain	maintain	VERB
fuelectenerg-421	99	18	the	the	DET
fuelectenerg-421	99	19	input	input	NOUN
fuelectenerg-421	99	20	impedance	impedance	NOUN
fuelectenerg-421	99	21	of	of	ADP
fuelectenerg-421	99	22	the	the	DET
fuelectenerg-421	99	23	input	input	NOUN
fuelectenerg-421	99	24	conversion	conversion	NOUN
fuelectenerg-421	99	25	block	block	NOUN
fuelectenerg-421	99	26	as	as	ADV
fuelectenerg-421	99	27	higher	high	ADJ
fuelectenerg-421	99	28	as	as	ADP
fuelectenerg-421	99	29	possible	possible	ADJ
fuelectenerg-421	99	30	.	.	PUNCT
fuelectenerg-421	100	1	in	in	ADP
fuelectenerg-421	100	2	order	order	NOUN
fuelectenerg-421	100	3	to	to	PART
fuelectenerg-421	100	4	achieve	achieve	VERB
fuelectenerg-421	100	5	high	high	ADJ
fuelectenerg-421	100	6	input	input	NOUN
fuelectenerg-421	100	7	impedance	impedance	NOUN
fuelectenerg-421	100	8	of	of	ADP
fuelectenerg-421	100	9	the	the	DET
fuelectenerg-421	100	10	input	input	NOUN
fuelectenerg-421	100	11	conversion	conversion	NOUN
fuelectenerg-421	100	12	block	block	NOUN
fuelectenerg-421	100	13	,	,	PUNCT
fuelectenerg-421	100	14	in	in	ADP
fuelectenerg-421	100	15	our	our	PRON
fuelectenerg-421	100	16	case	case	NOUN
fuelectenerg-421	100	17	,	,	PUNCT
fuelectenerg-421	100	18	the	the	DET
fuelectenerg-421	100	19	dc	dc	PROPN
fuelectenerg-421	100	20	bias	bias	PROPN
fuelectenerg-421	100	21	voltage	voltage	NOUN
fuelectenerg-421	100	22	was	be	AUX
fuelectenerg-421	100	23	268	268	NUM
fuelectenerg-421	100	24	d.	d.	PROPN
fuelectenerg-421	100	25	arbet	arbet	PROPN
fuelectenerg-421	100	26	,	,	PUNCT
fuelectenerg-421	100	27	v.	v.	ADP
fuelectenerg-421	100	28	stopjaková	stopjaková	PROPN
fuelectenerg-421	100	29	,	,	PUNCT
fuelectenerg-421	100	30	m.	m.	NOUN
fuelectenerg-421	100	31	kováč	kováč	PROPN
fuelectenerg-421	100	32	,	,	PUNCT
fuelectenerg-421	100	33	l.	l.	PROPN
fuelectenerg-421	100	34	nagy	nagy	PROPN
fuelectenerg-421	100	35	,	,	PUNCT
fuelectenerg-421	100	36	g.	g.	PROPN
fuelectenerg-421	100	37	nagy	nagy	PROPN
fuelectenerg-421	100	38	provided	provide	VERB
fuelectenerg-421	100	39	by	by	ADP
fuelectenerg-421	100	40	a	a	DET
fuelectenerg-421	100	41	voltage	voltage	NOUN
fuelectenerg-421	100	42	divider	divider	NOUN
fuelectenerg-421	100	43	implemented	implement	VERB
fuelectenerg-421	100	44	with	with	ADP
fuelectenerg-421	100	45	diode	diode	NOUN
fuelectenerg-421	100	46	-	-	PUNCT
fuelectenerg-421	100	47	connected	connect	VERB
fuelectenerg-421	100	48	mos	mos	NOUN
fuelectenerg-421	100	49	transistors	transistor	NOUN
fuelectenerg-421	100	50	.	.	PUNCT
fuelectenerg-421	101	1	this	this	PRON
fuelectenerg-421	101	2	represents	represent	VERB
fuelectenerg-421	101	3	rather	rather	ADV
fuelectenerg-421	101	4	important	important	ADJ
fuelectenerg-421	101	5	advantage	advantage	NOUN
fuelectenerg-421	101	6	of	of	ADP
fuelectenerg-421	101	7	the	the	DET
fuelectenerg-421	101	8	proposed	propose	VERB
fuelectenerg-421	101	9	readout	readout	NOUN
fuelectenerg-421	101	10	approach	approach	NOUN
fuelectenerg-421	101	11	.	.	PUNCT
fuelectenerg-421	102	1	to	to	PART
fuelectenerg-421	102	2	achieve	achieve	VERB
fuelectenerg-421	102	3	a	a	DET
fuelectenerg-421	102	4	high	high	ADJ
fuelectenerg-421	102	5	resistance	resistance	NOUN
fuelectenerg-421	102	6	of	of	ADP
fuelectenerg-421	102	7	the	the	DET
fuelectenerg-421	102	8	mos	mos	PROPN
fuelectenerg-421	102	9	transistor	transistor	NOUN
fuelectenerg-421	102	10	,	,	PUNCT
fuelectenerg-421	102	11	w\l	w\l	NOUN
fuelectenerg-421	102	12	ratio	ratio	NOUN
fuelectenerg-421	102	13	should	should	AUX
fuelectenerg-421	102	14	be	be	AUX
fuelectenerg-421	102	15	lower	low	ADJ
fuelectenerg-421	102	16	than	than	ADP
fuelectenerg-421	102	17	1	1	NUM
fuelectenerg-421	102	18	.	.	PUNCT
fuelectenerg-421	103	1	the	the	DET
fuelectenerg-421	103	2	main	main	ADJ
fuelectenerg-421	103	3	requirement	requirement	NOUN
fuelectenerg-421	103	4	for	for	ADP
fuelectenerg-421	103	5	the	the	DET
fuelectenerg-421	103	6	input	input	NOUN
fuelectenerg-421	103	7	buffer	buffer	NOUN
fuelectenerg-421	103	8	is	be	AUX
fuelectenerg-421	103	9	low	low	ADJ
fuelectenerg-421	103	10	voltage	voltage	NOUN
fuelectenerg-421	103	11	noise	noise	NOUN
fuelectenerg-421	103	12	and	and	CCONJ
fuelectenerg-421	103	13	low	low	ADJ
fuelectenerg-421	103	14	value	value	NOUN
fuelectenerg-421	103	15	of	of	ADP
fuelectenerg-421	103	16	the	the	DET
fuelectenerg-421	103	17	input	input	NOUN
fuelectenerg-421	103	18	offset	offset	NOUN
fuelectenerg-421	103	19	.	.	PUNCT
fuelectenerg-421	104	1	however	however	ADV
fuelectenerg-421	104	2	,	,	PUNCT
fuelectenerg-421	104	3	a	a	DET
fuelectenerg-421	104	4	two	two	NUM
fuelectenerg-421	104	5	-	-	PUNCT
fuelectenerg-421	104	6	stage	stage	NOUN
fuelectenerg-421	104	7	opamp	opamp	NOUN
fuelectenerg-421	104	8	topology	topology	NOUN
fuelectenerg-421	104	9	has	have	AUX
fuelectenerg-421	104	10	been	be	AUX
fuelectenerg-421	104	11	used	use	VERB
fuelectenerg-421	104	12	for	for	ADP
fuelectenerg-421	104	13	realization	realization	NOUN
fuelectenerg-421	104	14	of	of	ADP
fuelectenerg-421	104	15	the	the	DET
fuelectenerg-421	104	16	input	input	NOUN
fuelectenerg-421	104	17	lna	lna	PROPN
fuelectenerg-421	104	18	buffer	buffer	NOUN
fuelectenerg-421	104	19	(	(	PUNCT
fuelectenerg-421	104	20	fig	fig	NOUN
fuelectenerg-421	104	21	.	.	PUNCT
fuelectenerg-421	105	1	2	2	NUM
fuelectenerg-421	105	2	)	)	PUNCT
fuelectenerg-421	105	3	.	.	PUNCT
fuelectenerg-421	106	1	in	in	ADP
fuelectenerg-421	106	2	order	order	NOUN
fuelectenerg-421	106	3	to	to	PART
fuelectenerg-421	106	4	increase	increase	VERB
fuelectenerg-421	106	5	common	common	ADJ
fuelectenerg-421	106	6	-	-	PUNCT
fuelectenerg-421	106	7	mode	mode	NOUN
fuelectenerg-421	106	8	input	input	NOUN
fuelectenerg-421	106	9	range	range	NOUN
fuelectenerg-421	106	10	,	,	PUNCT
fuelectenerg-421	106	11	bulk	bulk	NOUN
fuelectenerg-421	106	12	of	of	ADP
fuelectenerg-421	106	13	the	the	DET
fuelectenerg-421	106	14	mos	mos	PROPN
fuelectenerg-421	106	15	transistors	transistor	NOUN
fuelectenerg-421	106	16	used	use	VERB
fuelectenerg-421	106	17	in	in	ADP
fuelectenerg-421	106	18	the	the	DET
fuelectenerg-421	106	19	input	input	NOUN
fuelectenerg-421	106	20	differential	differential	NOUN
fuelectenerg-421	106	21	pair	pair	NOUN
fuelectenerg-421	106	22	was	be	AUX
fuelectenerg-421	106	23	shorted	short	VERB
fuelectenerg-421	106	24	with	with	ADP
fuelectenerg-421	106	25	source	source	NOUN
fuelectenerg-421	106	26	.	.	PUNCT
fuelectenerg-421	107	1	in	in	ADP
fuelectenerg-421	107	2	this	this	DET
fuelectenerg-421	107	3	way	way	NOUN
fuelectenerg-421	107	4	,	,	PUNCT
fuelectenerg-421	107	5	the	the	DET
fuelectenerg-421	107	6	body	body	NOUN
fuelectenerg-421	107	7	effect	effect	NOUN
fuelectenerg-421	107	8	of	of	ADP
fuelectenerg-421	107	9	those	those	DET
fuelectenerg-421	107	10	transistors	transistor	NOUN
fuelectenerg-421	107	11	is	be	AUX
fuelectenerg-421	107	12	eliminated	eliminate	VERB
fuelectenerg-421	107	13	.	.	PUNCT
fuelectenerg-421	108	1	bias	bias	NOUN
fuelectenerg-421	108	2	voltage	voltage	NOUN
fuelectenerg-421	108	3	(	(	PUNCT
fuelectenerg-421	108	4	vbias	vbias	PROPN
fuelectenerg-421	108	5	)	)	PUNCT
fuelectenerg-421	108	6	is	be	AUX
fuelectenerg-421	108	7	generated	generate	VERB
fuelectenerg-421	108	8	on	on	ADP
fuelectenerg-421	108	9	chip	chip	NOUN
fuelectenerg-421	108	10	using	use	VERB
fuelectenerg-421	108	11	a	a	DET
fuelectenerg-421	108	12	mirrored	mirror	VERB
fuelectenerg-421	108	13	reference	reference	NOUN
fuelectenerg-421	108	14	current	current	NOUN
fuelectenerg-421	108	15	.	.	PUNCT
fuelectenerg-421	109	1	design	design	NOUN
fuelectenerg-421	109	2	of	of	ADP
fuelectenerg-421	109	3	the	the	DET
fuelectenerg-421	109	4	lna	lna	PROPN
fuelectenerg-421	109	5	buffer	buffer	NOUN
fuelectenerg-421	109	6	has	have	AUX
fuelectenerg-421	109	7	been	be	AUX
fuelectenerg-421	109	8	optimized	optimize	VERB
fuelectenerg-421	109	9	by	by	ADP
fuelectenerg-421	109	10	the	the	DET
fuelectenerg-421	109	11	proper	proper	ADJ
fuelectenerg-421	109	12	transistor	transistor	NOUN
fuelectenerg-421	109	13	size	size	NOUN
fuelectenerg-421	109	14	to	to	PART
fuelectenerg-421	109	15	obtain	obtain	VERB
fuelectenerg-421	109	16	low	low	ADJ
fuelectenerg-421	109	17	noise	noise	NOUN
fuelectenerg-421	109	18	and	and	CCONJ
fuelectenerg-421	109	19	low	low	ADJ
fuelectenerg-421	109	20	input	input	NOUN
fuelectenerg-421	109	21	offset	offset	NOUN
fuelectenerg-421	109	22	voltage	voltage	NOUN
fuelectenerg-421	109	23	.	.	PUNCT
fuelectenerg-421	110	1	nevertheless	nevertheless	ADV
fuelectenerg-421	110	2	,	,	PUNCT
fuelectenerg-421	110	3	from	from	ADP
fuelectenerg-421	110	4	the	the	DET
fuelectenerg-421	110	5	whole	whole	ADJ
fuelectenerg-421	110	6	readout	readout	NOUN
fuelectenerg-421	110	7	frontend	frontend	NOUN
fuelectenerg-421	110	8	circuit	circuit	NOUN
fuelectenerg-421	110	9	point	point	NOUN
fuelectenerg-421	110	10	of	of	ADP
fuelectenerg-421	110	11	view	view	NOUN
fuelectenerg-421	110	12	,	,	PUNCT
fuelectenerg-421	110	13	the	the	DET
fuelectenerg-421	110	14	input	input	NOUN
fuelectenerg-421	110	15	offset	offset	VERB
fuelectenerg-421	110	16	voltage	voltage	NOUN
fuelectenerg-421	110	17	of	of	ADP
fuelectenerg-421	110	18	lna	lna	PROPN
fuelectenerg-421	110	19	is	be	AUX
fuelectenerg-421	110	20	not	not	PART
fuelectenerg-421	110	21	critical	critical	ADJ
fuelectenerg-421	110	22	parameter	parameter	NOUN
fuelectenerg-421	110	23	because	because	SCONJ
fuelectenerg-421	110	24	dc	dc	PROPN
fuelectenerg-421	110	25	voltage	voltage	NOUN
fuelectenerg-421	110	26	is	be	AUX
fuelectenerg-421	110	27	removed	remove	VERB
fuelectenerg-421	110	28	by	by	ADP
fuelectenerg-421	110	29	external	external	ADJ
fuelectenerg-421	110	30	coupling	coupling	NOUN
fuelectenerg-421	110	31	capacitors	capacitor	NOUN
fuelectenerg-421	110	32	c1	c1	PROPN
fuelectenerg-421	110	33	and	and	CCONJ
fuelectenerg-421	110	34	c2	c2	PROPN
fuelectenerg-421	110	35	(	(	PUNCT
fuelectenerg-421	110	36	fig	fig	NOUN
fuelectenerg-421	110	37	.	.	PUNCT
fuelectenerg-421	111	1	1	1	NUM
fuelectenerg-421	111	2	)	)	PUNCT
fuelectenerg-421	111	3	.	.	PUNCT
fuelectenerg-421	112	1	since	since	SCONJ
fuelectenerg-421	112	2	the	the	DET
fuelectenerg-421	112	3	input	input	NOUN
fuelectenerg-421	112	4	capacitance	capacitance	NOUN
fuelectenerg-421	112	5	of	of	ADP
fuelectenerg-421	112	6	the	the	DET
fuelectenerg-421	112	7	input	input	NOUN
fuelectenerg-421	112	8	buffer	buffer	NOUN
fuelectenerg-421	112	9	depends	depend	VERB
fuelectenerg-421	112	10	on	on	ADP
fuelectenerg-421	112	11	gate	gate	NOUN
fuelectenerg-421	112	12	-	-	PUNCT
fuelectenerg-421	112	13	source	source	NOUN
fuelectenerg-421	112	14	capacitance	capacitance	NOUN
fuelectenerg-421	112	15	(	(	PUNCT
fuelectenerg-421	112	16	cgs	cgs	NOUN
fuelectenerg-421	112	17	)	)	PUNCT
fuelectenerg-421	112	18	of	of	ADP
fuelectenerg-421	112	19	input	input	NOUN
fuelectenerg-421	112	20	transistors	transistor	NOUN
fuelectenerg-421	112	21	used	use	VERB
fuelectenerg-421	112	22	in	in	ADP
fuelectenerg-421	112	23	the	the	DET
fuelectenerg-421	112	24	buffer	buffer	NOUN
fuelectenerg-421	112	25	,	,	PUNCT
fuelectenerg-421	112	26	sizes	size	NOUN
fuelectenerg-421	112	27	of	of	ADP
fuelectenerg-421	112	28	the	the	DET
fuelectenerg-421	112	29	input	input	NOUN
fuelectenerg-421	112	30	transistors	transistor	NOUN
fuelectenerg-421	112	31	have	have	VERB
fuelectenerg-421	112	32	to	to	PART
fuelectenerg-421	112	33	be	be	AUX
fuelectenerg-421	112	34	optimized	optimize	VERB
fuelectenerg-421	112	35	in	in	ADP
fuelectenerg-421	112	36	order	order	NOUN
fuelectenerg-421	112	37	to	to	PART
fuelectenerg-421	112	38	reduce	reduce	VERB
fuelectenerg-421	112	39	capacitance	capacitance	NOUN
fuelectenerg-421	112	40	cgs	cgs	NOUN
fuelectenerg-421	112	41	.	.	PUNCT
fuelectenerg-421	113	1	to	to	PART
fuelectenerg-421	113	2	reduce	reduce	VERB
fuelectenerg-421	113	3	the	the	DET
fuelectenerg-421	113	4	input	input	NOUN
fuelectenerg-421	113	5	noise	noise	NOUN
fuelectenerg-421	113	6	caused	cause	VERB
fuelectenerg-421	113	7	by	by	ADP
fuelectenerg-421	113	8	the	the	DET
fuelectenerg-421	113	9	mcm	mcm	PROPN
fuelectenerg-421	113	10	,	,	PUNCT
fuelectenerg-421	113	11	capacitors	capacitor	NOUN
fuelectenerg-421	113	12	cp1	cp1	PROPN
fuelectenerg-421	113	13	and	and	CCONJ
fuelectenerg-421	113	14	cp2	cp2	PROPN
fuelectenerg-421	113	15	were	be	AUX
fuelectenerg-421	113	16	connected	connect	VERB
fuelectenerg-421	113	17	in	in	ADP
fuelectenerg-421	113	18	parallel	parallel	NOUN
fuelectenerg-421	113	19	with	with	ADP
fuelectenerg-421	113	20	the	the	DET
fuelectenerg-421	113	21	diode	diode	NOUN
fuelectenerg-421	113	22	-	-	PUNCT
fuelectenerg-421	113	23	connected	connect	VERB
fuelectenerg-421	113	24	mos	mos	NOUN
fuelectenerg-421	113	25	transistors	transistor	NOUN
fuelectenerg-421	113	26	(	(	PUNCT
fuelectenerg-421	113	27	fig	fig	NOUN
fuelectenerg-421	113	28	.	.	PUNCT
fuelectenerg-421	114	1	3	3	NUM
fuelectenerg-421	114	2	)	)	PUNCT
fuelectenerg-421	114	3	.	.	PUNCT
fuelectenerg-421	115	1	on	on	ADP
fuelectenerg-421	115	2	the	the	DET
fuelectenerg-421	115	3	other	other	ADJ
fuelectenerg-421	115	4	hand	hand	NOUN
fuelectenerg-421	115	5	,	,	PUNCT
fuelectenerg-421	115	6	capacitances	capacitance	NOUN
fuelectenerg-421	115	7	cp1	cp1	NOUN
fuelectenerg-421	115	8	and	and	CCONJ
fuelectenerg-421	115	9	cp2	cp2	PROPN
fuelectenerg-421	115	10	together	together	ADV
fuelectenerg-421	115	11	with	with	ADP
fuelectenerg-421	115	12	capacitance	capacitance	NOUN
fuelectenerg-421	115	13	of	of	ADP
fuelectenerg-421	115	14	the	the	DET
fuelectenerg-421	115	15	microphone	microphone	NOUN
fuelectenerg-421	115	16	form	form	NOUN
fuelectenerg-421	115	17	a	a	DET
fuelectenerg-421	115	18	capacitive	capacitive	ADJ
fuelectenerg-421	115	19	divider	divider	NOUN
fuelectenerg-421	115	20	(	(	PUNCT
fuelectenerg-421	115	21	sensitivity	sensitivity	NOUN
fuelectenerg-421	115	22	of	of	ADP
fuelectenerg-421	115	23	the	the	DET
fuelectenerg-421	115	24	mcm	mcm	PROPN
fuelectenerg-421	115	25	might	might	AUX
fuelectenerg-421	115	26	be	be	AUX
fuelectenerg-421	115	27	influenced	influence	VERB
fuelectenerg-421	115	28	)	)	PUNCT
fuelectenerg-421	115	29	.	.	PUNCT
fuelectenerg-421	116	1	therefore	therefore	ADV
fuelectenerg-421	116	2	,	,	PUNCT
fuelectenerg-421	116	3	another	another	DET
fuelectenerg-421	116	4	critical	critical	ADJ
fuelectenerg-421	116	5	issue	issue	NOUN
fuelectenerg-421	116	6	is	be	AUX
fuelectenerg-421	116	7	minimization	minimization	NOUN
fuelectenerg-421	116	8	of	of	ADP
fuelectenerg-421	116	9	the	the	DET
fuelectenerg-421	116	10	impact	impact	NOUN
fuelectenerg-421	116	11	of	of	ADP
fuelectenerg-421	116	12	capacitances	capacitance	NOUN
fuelectenerg-421	116	13	cp1	cp1	NOUN
fuelectenerg-421	116	14	and	and	CCONJ
fuelectenerg-421	116	15	cp2	cp2	PROPN
fuelectenerg-421	116	16	,	,	PUNCT
fuelectenerg-421	116	17	which	which	PRON
fuelectenerg-421	116	18	can	can	AUX
fuelectenerg-421	116	19	negatively	negatively	ADV
fuelectenerg-421	116	20	affect	affect	VERB
fuelectenerg-421	116	21	the	the	DET
fuelectenerg-421	116	22	microphone	microphone	NOUN
fuelectenerg-421	116	23	sensitivity	sensitivity	NOUN
fuelectenerg-421	116	24	.	.	PUNCT
fuelectenerg-421	117	1	small	small	ADJ
fuelectenerg-421	117	2	-	-	PUNCT
fuelectenerg-421	117	3	signal	signal	NOUN
fuelectenerg-421	117	4	equivalent	equivalent	ADJ
fuelectenerg-421	117	5	circuit	circuit	NOUN
fuelectenerg-421	117	6	of	of	ADP
fuelectenerg-421	117	7	the	the	DET
fuelectenerg-421	117	8	input	input	NOUN
fuelectenerg-421	117	9	conversion	conversion	NOUN
fuelectenerg-421	117	10	block	block	NOUN
fuelectenerg-421	117	11	is	be	AUX
fuelectenerg-421	117	12	depicted	depict	VERB
fuelectenerg-421	117	13	in	in	ADP
fuelectenerg-421	117	14	fig	fig	NOUN
fuelectenerg-421	117	15	.	.	PUNCT
fuelectenerg-421	118	1	3	3	NUM
fuelectenerg-421	118	2	,	,	PUNCT
fuelectenerg-421	118	3	where	where	SCONJ
fuelectenerg-421	118	4	cmcm	cmcm	NOUN
fuelectenerg-421	118	5	is	be	AUX
fuelectenerg-421	118	6	the	the	DET
fuelectenerg-421	118	7	nominal	nominal	ADJ
fuelectenerg-421	118	8	capacitance	capacitance	NOUN
fuelectenerg-421	118	9	of	of	ADP
fuelectenerg-421	118	10	the	the	DET
fuelectenerg-421	118	11	microphone	microphone	NOUN
fuelectenerg-421	118	12	,	,	PUNCT
fuelectenerg-421	118	13	cin_buff	cin_buff	NOUN
fuelectenerg-421	118	14	is	be	AUX
fuelectenerg-421	118	15	the	the	DET
fuelectenerg-421	118	16	input	input	NOUN
fuelectenerg-421	118	17	capacitance	capacitance	NOUN
fuelectenerg-421	118	18	of	of	ADP
fuelectenerg-421	118	19	the	the	DET
fuelectenerg-421	118	20	input	input	NOUN
fuelectenerg-421	118	21	buffer	buffer	NOUN
fuelectenerg-421	118	22	and	and	CCONJ
fuelectenerg-421	118	23	rds	rd	NOUN
fuelectenerg-421	118	24	represents	represent	VERB
fuelectenerg-421	118	25	a	a	DET
fuelectenerg-421	118	26	resistance	resistance	NOUN
fuelectenerg-421	118	27	of	of	ADP
fuelectenerg-421	118	28	the	the	DET
fuelectenerg-421	118	29	respective	respective	ADJ
fuelectenerg-421	118	30	diode	diode	NOUN
fuelectenerg-421	118	31	-	-	PUNCT
fuelectenerg-421	118	32	connected	connect	VERB
fuelectenerg-421	118	33	mos	mos	NOUN
fuelectenerg-421	118	34	transistor	transistor	NOUN
fuelectenerg-421	118	35	.	.	PUNCT
fuelectenerg-421	119	1	fig	fig	NOUN
fuelectenerg-421	119	2	.	.	PUNCT
fuelectenerg-421	120	1	3	3	NUM
fuelectenerg-421	120	2	small	small	ADJ
fuelectenerg-421	120	3	-	-	PUNCT
fuelectenerg-421	120	4	signal	signal	NOUN
fuelectenerg-421	120	5	equivalent	equivalent	ADJ
fuelectenerg-421	120	6	circuit	circuit	NOUN
fuelectenerg-421	120	7	of	of	ADP
fuelectenerg-421	120	8	the	the	DET
fuelectenerg-421	120	9	input	input	NOUN
fuelectenerg-421	120	10	conversion	conversion	NOUN
fuelectenerg-421	120	11	block	block	NOUN
fuelectenerg-421	120	12	transfer	transfer	NOUN
fuelectenerg-421	120	13	function	function	NOUN
fuelectenerg-421	120	14	of	of	ADP
fuelectenerg-421	120	15	the	the	DET
fuelectenerg-421	120	16	proposed	propose	VERB
fuelectenerg-421	120	17	block	block	NOUN
fuelectenerg-421	120	18	is	be	AUX
fuelectenerg-421	120	19	expressed	express	VERB
fuelectenerg-421	120	20	by	by	ADP
fuelectenerg-421	120	21	eq	eq	ADJ
fuelectenerg-421	120	22	.	.	PROPN
fuelectenerg-421	120	23	1	1	NUM
fuelectenerg-421	120	24	.	.	PUNCT
fuelectenerg-421	121	1	a(s	a(s	NUM
fuelectenerg-421	121	2	)	)	PUNCT
fuelectenerg-421	122	1	=	=	NOUN
fuelectenerg-421	122	2	cmcm	cmcm	NOUN
fuelectenerg-421	122	3	cmcm	cmcm	NOUN
fuelectenerg-421	122	4	+	+	CCONJ
fuelectenerg-421	122	5	ctot	ctot	ADJ
fuelectenerg-421	122	6	×	×	NOUN
fuelectenerg-421	122	7	1	1	NUM
fuelectenerg-421	122	8	1	1	NUM
fuelectenerg-421	122	9	+	+	NUM
fuelectenerg-421	122	10	cmcm	cmcm	NOUN
fuelectenerg-421	122	11	cmcm	cmcm	NOUN
fuelectenerg-421	122	12	+	+	CCONJ
fuelectenerg-421	122	13	ctot	ctot	ADJ
fuelectenerg-421	122	14	×	×	NOUN
fuelectenerg-421	122	15	1	1	NUM
fuelectenerg-421	122	16	scmcmrds	scmcmrd	NOUN
fuelectenerg-421	122	17	(	(	PUNCT
fuelectenerg-421	122	18	1	1	X
fuelectenerg-421	122	19	)	)	PUNCT
fuelectenerg-421	122	20	capacitance	capacitance	NOUN
fuelectenerg-421	122	21	ctot	ctot	NOUN
fuelectenerg-421	122	22	represents	represent	VERB
fuelectenerg-421	122	23	the	the	DET
fuelectenerg-421	122	24	sum	sum	NOUN
fuelectenerg-421	122	25	of	of	ADP
fuelectenerg-421	122	26	capacitances	capacitance	NOUN
fuelectenerg-421	122	27	cp1	cp1	X
fuelectenerg-421	122	28	,	,	PUNCT
fuelectenerg-421	122	29	cp2	cp2	PROPN
fuelectenerg-421	122	30	and	and	CCONJ
fuelectenerg-421	122	31	cin_buff	cin_buff	NOUN
fuelectenerg-421	122	32	.	.	PUNCT
fuelectenerg-421	123	1	however	however	ADV
fuelectenerg-421	123	2	,	,	PUNCT
fuelectenerg-421	123	3	transfer	transfer	NOUN
fuelectenerg-421	123	4	function	function	NOUN
fuelectenerg-421	123	5	can	can	AUX
fuelectenerg-421	123	6	be	be	AUX
fuelectenerg-421	123	7	rewritten	rewrite	VERB
fuelectenerg-421	123	8	as	as	ADP
fuelectenerg-421	123	9	:	:	PUNCT
fuelectenerg-421	123	10	design	design	NOUN
fuelectenerg-421	123	11	of	of	ADP
fuelectenerg-421	123	12	cmos	cmos	PROPN
fuelectenerg-421	123	13	readout	readout	PROPN
fuelectenerg-421	123	14	frontend	frontend	NOUN
fuelectenerg-421	123	15	circuit	circuit	NOUN
fuelectenerg-421	123	16	for	for	ADP
fuelectenerg-421	123	17	mems	mem	NOUN
fuelectenerg-421	123	18	capacitive	capacitive	ADJ
fuelectenerg-421	123	19	microphones	microphone	NOUN
fuelectenerg-421	123	20	269	269	NUM
fuelectenerg-421	123	21	a(s	a(	NOUN
fuelectenerg-421	123	22	)	)	PUNCT
fuelectenerg-421	124	1	=	=	PUNCT
fuelectenerg-421	125	1	k	k	NOUN
fuelectenerg-421	125	2	×	×	NOUN
fuelectenerg-421	125	3	1	1	NUM
fuelectenerg-421	125	4	1	1	NUM
fuelectenerg-421	125	5	+	+	NUM
fuelectenerg-421	125	6	k	k	PROPN
fuelectenerg-421	125	7	×	×	NOUN
fuelectenerg-421	125	8	1	1	NUM
fuelectenerg-421	125	9	scmcmrds	scmcmrd	NOUN
fuelectenerg-421	125	10	(	(	PUNCT
fuelectenerg-421	125	11	2	2	NUM
fuelectenerg-421	125	12	)	)	PUNCT
fuelectenerg-421	125	13	where	where	SCONJ
fuelectenerg-421	125	14	k	k	NOUN
fuelectenerg-421	125	15	=	=	PUNCT
fuelectenerg-421	125	16	cmcm	cmcm	PROPN
fuelectenerg-421	125	17	cmcm	cmcm	NOUN
fuelectenerg-421	126	1	+	+	CCONJ
fuelectenerg-421	126	2	ctot	ctot	ADJ
fuelectenerg-421	126	3	(	(	PUNCT
fuelectenerg-421	126	4	3	3	NUM
fuelectenerg-421	126	5	)	)	PUNCT
fuelectenerg-421	126	6	from	from	ADP
fuelectenerg-421	126	7	transfer	transfer	NOUN
fuelectenerg-421	126	8	function	function	NOUN
fuelectenerg-421	126	9	,	,	PUNCT
fuelectenerg-421	126	10	one	one	PRON
fuelectenerg-421	126	11	can	can	AUX
fuelectenerg-421	126	12	express	express	VERB
fuelectenerg-421	126	13	the	the	DET
fuelectenerg-421	126	14	gain	gain	NOUN
fuelectenerg-421	126	15	and	and	CCONJ
fuelectenerg-421	126	16	corner	corner	NOUN
fuelectenerg-421	126	17	frequency	frequency	NOUN
fuelectenerg-421	126	18	of	of	ADP
fuelectenerg-421	126	19	the	the	DET
fuelectenerg-421	126	20	inverted	inverted	ADJ
fuelectenerg-421	126	21	pole	pole	NOUN
fuelectenerg-421	126	22	.	.	PUNCT
fuelectenerg-421	127	1	as	as	SCONJ
fuelectenerg-421	127	2	can	can	AUX
fuelectenerg-421	127	3	be	be	AUX
fuelectenerg-421	127	4	seen	see	VERB
fuelectenerg-421	127	5	from	from	ADP
fuelectenerg-421	127	6	eq	eq	NOUN
fuelectenerg-421	127	7	.	.	PROPN
fuelectenerg-421	127	8	2	2	NUM
fuelectenerg-421	127	9	,	,	PUNCT
fuelectenerg-421	127	10	gain	gain	NOUN
fuelectenerg-421	127	11	of	of	ADP
fuelectenerg-421	127	12	the	the	DET
fuelectenerg-421	127	13	transfer	transfer	NOUN
fuelectenerg-421	127	14	function	function	NOUN
fuelectenerg-421	127	15	is	be	AUX
fuelectenerg-421	127	16	multiplied	multiply	VERB
fuelectenerg-421	127	17	by	by	ADP
fuelectenerg-421	127	18	term	term	NOUN
fuelectenerg-421	127	19	k.	k.	PROPN
fuelectenerg-421	128	1	thus	thus	ADV
fuelectenerg-421	128	2	,	,	PUNCT
fuelectenerg-421	128	3	sensitivity	sensitivity	NOUN
fuelectenerg-421	128	4	of	of	ADP
fuelectenerg-421	128	5	the	the	DET
fuelectenerg-421	128	6	microphone	microphone	NOUN
fuelectenerg-421	128	7	depends	depend	VERB
fuelectenerg-421	128	8	on	on	ADP
fuelectenerg-421	128	9	the	the	DET
fuelectenerg-421	128	10	ratio	ratio	NOUN
fuelectenerg-421	128	11	of	of	ADP
fuelectenerg-421	128	12	capacitances	capacitance	NOUN
fuelectenerg-421	128	13	cmcm	cmcm	NOUN
fuelectenerg-421	128	14	and	and	CCONJ
fuelectenerg-421	128	15	ctot	ctot	NOUN
fuelectenerg-421	128	16	,	,	PUNCT
fuelectenerg-421	128	17	expressed	express	VERB
fuelectenerg-421	128	18	by	by	ADP
fuelectenerg-421	128	19	eq	eq	PROPN
fuelectenerg-421	128	20	.	.	PROPN
fuelectenerg-421	128	21	3	3	X
fuelectenerg-421	128	22	.	.	X
fuelectenerg-421	128	23	hence	hence	ADV
fuelectenerg-421	128	24	,	,	PUNCT
fuelectenerg-421	128	25	in	in	ADP
fuelectenerg-421	128	26	terms	term	NOUN
fuelectenerg-421	128	27	of	of	ADP
fuelectenerg-421	128	28	requirements	requirement	NOUN
fuelectenerg-421	128	29	for	for	ADP
fuelectenerg-421	128	30	the	the	DET
fuelectenerg-421	128	31	mcm	mcm	PROPN
fuelectenerg-421	128	32	sensitivity	sensitivity	NOUN
fuelectenerg-421	128	33	,	,	PUNCT
fuelectenerg-421	128	34	values	value	NOUN
fuelectenerg-421	128	35	of	of	ADP
fuelectenerg-421	128	36	capacitors	capacitor	NOUN
fuelectenerg-421	128	37	cp1	cp1	X
fuelectenerg-421	128	38	and	and	CCONJ
fuelectenerg-421	128	39	cp2	cp2	PROPN
fuelectenerg-421	128	40	should	should	AUX
fuelectenerg-421	128	41	be	be	AUX
fuelectenerg-421	128	42	at	at	ADV
fuelectenerg-421	128	43	least	least	ADV
fuelectenerg-421	128	44	10	10	NUM
fuelectenerg-421	128	45	times	time	NOUN
fuelectenerg-421	128	46	lower	low	ADJ
fuelectenerg-421	128	47	than	than	ADP
fuelectenerg-421	128	48	the	the	DET
fuelectenerg-421	128	49	nominal	nominal	ADJ
fuelectenerg-421	128	50	capacitance	capacitance	NOUN
fuelectenerg-421	128	51	(	(	PUNCT
fuelectenerg-421	128	52	cmcm	cmcm	NOUN
fuelectenerg-421	128	53	)	)	PUNCT
fuelectenerg-421	128	54	of	of	ADP
fuelectenerg-421	128	55	the	the	DET
fuelectenerg-421	128	56	microphone	microphone	NOUN
fuelectenerg-421	128	57	.	.	PUNCT
fuelectenerg-421	129	1	under	under	ADP
fuelectenerg-421	129	2	this	this	DET
fuelectenerg-421	129	3	condition	condition	NOUN
fuelectenerg-421	129	4	,	,	PUNCT
fuelectenerg-421	129	5	the	the	DET
fuelectenerg-421	129	6	original	original	ADJ
fuelectenerg-421	129	7	value	value	NOUN
fuelectenerg-421	129	8	of	of	ADP
fuelectenerg-421	129	9	the	the	DET
fuelectenerg-421	129	10	mcm	mcm	PROPN
fuelectenerg-421	129	11	sensitivity	sensitivity	NOUN
fuelectenerg-421	129	12	is	be	AUX
fuelectenerg-421	129	13	maintained	maintain	VERB
fuelectenerg-421	129	14	.	.	PUNCT
fuelectenerg-421	130	1	the	the	DET
fuelectenerg-421	130	2	low	low	ADJ
fuelectenerg-421	130	3	frequency	frequency	NOUN
fuelectenerg-421	130	4	corner	corner	NOUN
fuelectenerg-421	130	5	,	,	PUNCT
fuelectenerg-421	130	6	formed	form	VERB
fuelectenerg-421	130	7	by	by	ADP
fuelectenerg-421	130	8	the	the	DET
fuelectenerg-421	130	9	input	input	NOUN
fuelectenerg-421	130	10	conversion	conversion	NOUN
fuelectenerg-421	130	11	block	block	NOUN
fuelectenerg-421	130	12	,	,	PUNCT
fuelectenerg-421	130	13	can	can	AUX
fuelectenerg-421	130	14	be	be	AUX
fuelectenerg-421	130	15	expressed	express	VERB
fuelectenerg-421	130	16	as	as	ADP
fuelectenerg-421	130	17	:	:	PUNCT
fuelectenerg-421	130	18	_	_	NOUN
fuelectenerg-421	130	19	3	3	NUM
fuelectenerg-421	130	20	1	1	NUM
fuelectenerg-421	130	21	2	2	NUM
fuelectenerg-421	130	22	(	(	PUNCT
fuelectenerg-421	130	23	)	)	PUNCT
fuelectenerg-421	130	24	l	l	NOUN
fuelectenerg-421	130	25	db	db	NOUN
fuelectenerg-421	130	26	ds	ds	PRON
fuelectenerg-421	130	27	mcm	mcm	PROPN
fuelectenerg-421	130	28	tot	tot	NOUN
fuelectenerg-421	130	29	f	f	PROPN
fuelectenerg-421	130	30	r	r	NOUN
fuelectenerg-421	130	31	c	c	PROPN
fuelectenerg-421	130	32	c	c	PROPN
fuelectenerg-421	130	33			PROPN
fuelectenerg-421	130	34			PRON
fuelectenerg-421	130	35			PUNCT
fuelectenerg-421	130	36	(	(	PUNCT
fuelectenerg-421	130	37	4	4	NUM
fuelectenerg-421	130	38	)	)	PUNCT
fuelectenerg-421	130	39	from	from	ADP
fuelectenerg-421	130	40	eq	eq	ADP
fuelectenerg-421	130	41	.	.	PROPN
fuelectenerg-421	130	42	4	4	NUM
fuelectenerg-421	130	43	,	,	PUNCT
fuelectenerg-421	130	44	one	one	PRON
fuelectenerg-421	130	45	can	can	AUX
fuelectenerg-421	130	46	observe	observe	VERB
fuelectenerg-421	130	47	that	that	SCONJ
fuelectenerg-421	130	48	capacitors	capacitor	NOUN
fuelectenerg-421	130	49	cp1	cp1	PROPN
fuelectenerg-421	130	50	and	and	CCONJ
fuelectenerg-421	130	51	cp2	cp2	PROPN
fuelectenerg-421	130	52	might	might	AUX
fuelectenerg-421	130	53	cause	cause	VERB
fuelectenerg-421	130	54	an	an	DET
fuelectenerg-421	130	55	undesired	undesired	ADJ
fuelectenerg-421	130	56	shift	shift	NOUN
fuelectenerg-421	130	57	of	of	ADP
fuelectenerg-421	130	58	the	the	DET
fuelectenerg-421	130	59	low	low	ADJ
fuelectenerg-421	130	60	corner	corner	NOUN
fuelectenerg-421	130	61	frequency	frequency	NOUN
fuelectenerg-421	130	62	of	of	ADP
fuelectenerg-421	130	63	the	the	DET
fuelectenerg-421	130	64	readout	readout	NOUN
fuelectenerg-421	130	65	interface	interface	NOUN
fuelectenerg-421	130	66	.	.	PUNCT
fuelectenerg-421	131	1	therefore	therefore	ADV
fuelectenerg-421	131	2	,	,	PUNCT
fuelectenerg-421	131	3	to	to	PART
fuelectenerg-421	131	4	maintain	maintain	VERB
fuelectenerg-421	131	5	the	the	DET
fuelectenerg-421	131	6	original	original	ADJ
fuelectenerg-421	131	7	value	value	NOUN
fuelectenerg-421	131	8	of	of	ADP
fuelectenerg-421	131	9	the	the	DET
fuelectenerg-421	131	10	low	low	ADJ
fuelectenerg-421	131	11	corner	corner	NOUN
fuelectenerg-421	131	12	frequency	frequency	NOUN
fuelectenerg-421	131	13	,	,	PUNCT
fuelectenerg-421	131	14	the	the	DET
fuelectenerg-421	131	15	values	value	NOUN
fuelectenerg-421	131	16	of	of	ADP
fuelectenerg-421	131	17	capacitors	capacitor	NOUN
fuelectenerg-421	131	18	cp1	cp1	X
fuelectenerg-421	131	19	and	and	CCONJ
fuelectenerg-421	131	20	cp2	cp2	PROPN
fuelectenerg-421	131	21	should	should	AUX
fuelectenerg-421	131	22	be	be	AUX
fuelectenerg-421	131	23	chosen	choose	VERB
fuelectenerg-421	131	24	appropriately	appropriately	ADV
fuelectenerg-421	131	25	.	.	PUNCT
fuelectenerg-421	132	1	to	to	PART
fuelectenerg-421	132	2	conclude	conclude	VERB
fuelectenerg-421	132	3	,	,	PUNCT
fuelectenerg-421	132	4	we	we	PRON
fuelectenerg-421	132	5	would	would	AUX
fuelectenerg-421	132	6	like	like	VERB
fuelectenerg-421	132	7	to	to	PART
fuelectenerg-421	132	8	underline	underline	VERB
fuelectenerg-421	132	9	that	that	SCONJ
fuelectenerg-421	132	10	capacitors	capacitor	NOUN
fuelectenerg-421	132	11	cp1	cp1	PROPN
fuelectenerg-421	132	12	and	and	CCONJ
fuelectenerg-421	132	13	cp2	cp2	PROPN
fuelectenerg-421	132	14	can	can	AUX
fuelectenerg-421	132	15	be	be	AUX
fuelectenerg-421	132	16	used	use	VERB
fuelectenerg-421	132	17	for	for	ADP
fuelectenerg-421	132	18	noise	noise	NOUN
fuelectenerg-421	132	19	reduction	reduction	NOUN
fuelectenerg-421	132	20	but	but	CCONJ
fuelectenerg-421	132	21	in	in	ADP
fuelectenerg-421	132	22	order	order	NOUN
fuelectenerg-421	132	23	to	to	PART
fuelectenerg-421	132	24	maintain	maintain	VERB
fuelectenerg-421	132	25	the	the	DET
fuelectenerg-421	132	26	original	original	ADJ
fuelectenerg-421	132	27	value	value	NOUN
fuelectenerg-421	132	28	of	of	ADP
fuelectenerg-421	132	29	the	the	DET
fuelectenerg-421	132	30	mcm	mcm	PROPN
fuelectenerg-421	132	31	sensitivity	sensitivity	NOUN
fuelectenerg-421	132	32	and	and	CCONJ
fuelectenerg-421	132	33	low	low	ADJ
fuelectenerg-421	132	34	corner	corner	NOUN
fuelectenerg-421	132	35	frequency	frequency	NOUN
fuelectenerg-421	132	36	of	of	ADP
fuelectenerg-421	132	37	the	the	DET
fuelectenerg-421	132	38	readout	readout	NOUN
fuelectenerg-421	132	39	circuit	circuit	NOUN
fuelectenerg-421	132	40	,	,	PUNCT
fuelectenerg-421	132	41	their	their	PRON
fuelectenerg-421	132	42	values	value	NOUN
fuelectenerg-421	132	43	must	must	AUX
fuelectenerg-421	132	44	be	be	AUX
fuelectenerg-421	132	45	carefully	carefully	ADV
fuelectenerg-421	132	46	selected	select	VERB
fuelectenerg-421	132	47	.	.	PUNCT
fuelectenerg-421	133	1	4	4	X
fuelectenerg-421	133	2	.	.	NOUN
fuelectenerg-421	133	3	results	result	NOUN
fuelectenerg-421	133	4	and	and	CCONJ
fuelectenerg-421	133	5	discussion	discussion	NOUN
fuelectenerg-421	133	6	for	for	ADP
fuelectenerg-421	133	7	evaluation	evaluation	NOUN
fuelectenerg-421	133	8	the	the	DET
fuelectenerg-421	133	9	designed	design	VERB
fuelectenerg-421	133	10	ri	ri	PROPN
fuelectenerg-421	133	11	,	,	PUNCT
fuelectenerg-421	133	12	the	the	DET
fuelectenerg-421	133	13	main	main	ADJ
fuelectenerg-421	133	14	parameters	parameter	NOUN
fuelectenerg-421	133	15	were	be	AUX
fuelectenerg-421	133	16	simulated	simulate	VERB
fuelectenerg-421	133	17	in	in	ADP
fuelectenerg-421	133	18	cadence	cadence	NOUN
fuelectenerg-421	133	19	design	design	NOUN
fuelectenerg-421	133	20	environment	environment	NOUN
fuelectenerg-421	133	21	.	.	PUNCT
fuelectenerg-421	134	1	fig	fig	NOUN
fuelectenerg-421	134	2	.	.	PUNCT
fuelectenerg-421	135	1	4	4	NUM
fuelectenerg-421	135	2	shows	show	VERB
fuelectenerg-421	135	3	the	the	DET
fuelectenerg-421	135	4	boundary	boundary	ADJ
fuelectenerg-421	135	5	frequency	frequency	NOUN
fuelectenerg-421	135	6	responses	response	NOUN
fuelectenerg-421	135	7	of	of	ADP
fuelectenerg-421	135	8	the	the	DET
fuelectenerg-421	135	9	proposed	propose	VERB
fuelectenerg-421	135	10	readout	readout	NOUN
fuelectenerg-421	135	11	circuit	circuit	NOUN
fuelectenerg-421	135	12	obtained	obtain	VERB
fuelectenerg-421	135	13	from	from	ADP
fuelectenerg-421	135	14	corner	corner	NOUN
fuelectenerg-421	135	15	analysis	analysis	NOUN
fuelectenerg-421	135	16	,	,	PUNCT
fuelectenerg-421	135	17	where	where	SCONJ
fuelectenerg-421	135	18	the	the	DET
fuelectenerg-421	135	19	process	process	NOUN
fuelectenerg-421	135	20	and	and	CCONJ
fuelectenerg-421	135	21	temperature	temperature	NOUN
fuelectenerg-421	135	22	variations	variation	NOUN
fuelectenerg-421	135	23	were	be	AUX
fuelectenerg-421	135	24	taken	take	VERB
fuelectenerg-421	135	25	into	into	ADP
fuelectenerg-421	135	26	account	account	NOUN
fuelectenerg-421	135	27	.	.	PUNCT
fuelectenerg-421	136	1	the	the	DET
fuelectenerg-421	136	2	low	low	ADJ
fuelectenerg-421	136	3	corner	corner	NOUN
fuelectenerg-421	136	4	frequency	frequency	NOUN
fuelectenerg-421	136	5	will	will	AUX
fuelectenerg-421	136	6	vary	vary	VERB
fuelectenerg-421	136	7	from	from	ADP
fuelectenerg-421	136	8	19.2	19.2	NUM
fuelectenerg-421	136	9	hz	hz	NOUN
fuelectenerg-421	136	10	to	to	ADP
fuelectenerg-421	136	11	33.1	33.1	NUM
fuelectenerg-421	136	12	hz	hz	NOUN
fuelectenerg-421	136	13	while	while	SCONJ
fuelectenerg-421	136	14	the	the	DET
fuelectenerg-421	136	15	high	high	ADJ
fuelectenerg-421	136	16	corner	corner	NOUN
fuelectenerg-421	136	17	frequency	frequency	NOUN
fuelectenerg-421	136	18	is	be	AUX
fuelectenerg-421	136	19	kept	keep	VERB
fuelectenerg-421	136	20	in	in	ADP
fuelectenerg-421	136	21	the	the	DET
fuelectenerg-421	136	22	range	range	NOUN
fuelectenerg-421	136	23	from	from	ADP
fuelectenerg-421	136	24	7.4	7.4	NUM
fuelectenerg-421	136	25	khz	khz	NOUN
fuelectenerg-421	136	26	to	to	ADP
fuelectenerg-421	136	27	15.2	15.2	NUM
fuelectenerg-421	136	28	khz	khz	NOUN
fuelectenerg-421	136	29	.	.	PUNCT
fuelectenerg-421	137	1	the	the	DET
fuelectenerg-421	137	2	obtained	obtain	VERB
fuelectenerg-421	137	3	gain	gain	NOUN
fuelectenerg-421	137	4	is	be	AUX
fuelectenerg-421	137	5	in	in	ADP
fuelectenerg-421	137	6	the	the	DET
fuelectenerg-421	137	7	range	range	NOUN
fuelectenerg-421	137	8	from	from	ADP
fuelectenerg-421	137	9	24.6	24.6	NUM
fuelectenerg-421	137	10	db	db	NOUN
fuelectenerg-421	137	11	to	to	ADP
fuelectenerg-421	137	12	26.1	26.1	NUM
fuelectenerg-421	137	13	db	db	PROPN
fuelectenerg-421	137	14	.	.	PROPN
fuelectenerg-421	137	15	slope	slope	NOUN
fuelectenerg-421	137	16	of	of	ADP
fuelectenerg-421	137	17	the	the	DET
fuelectenerg-421	137	18	lpf	lpf	PROPN
fuelectenerg-421	137	19	and	and	CCONJ
fuelectenerg-421	137	20	hpf	hpf	PROPN
fuelectenerg-421	137	21	is	be	AUX
fuelectenerg-421	137	22	10db	10db	ADJ
fuelectenerg-421	137	23	/	/	SYM
fuelectenerg-421	137	24	octave	octave	NOUN
fuelectenerg-421	137	25	and	and	CCONJ
fuelectenerg-421	137	26	18db	18db	ADJ
fuelectenerg-421	137	27	/	/	SYM
fuelectenerg-421	137	28	octave	octave	NOUN
fuelectenerg-421	137	29	,	,	PUNCT
fuelectenerg-421	137	30	respectively	respectively	ADV
fuelectenerg-421	137	31	.	.	PUNCT
fuelectenerg-421	138	1	however	however	ADV
fuelectenerg-421	138	2	,	,	PUNCT
fuelectenerg-421	138	3	shape	shape	NOUN
fuelectenerg-421	138	4	of	of	ADP
fuelectenerg-421	138	5	the	the	DET
fuelectenerg-421	138	6	final	final	ADJ
fuelectenerg-421	138	7	frequency	frequency	NOUN
fuelectenerg-421	138	8	response	response	NOUN
fuelectenerg-421	138	9	mainly	mainly	ADV
fuelectenerg-421	138	10	depends	depend	VERB
fuelectenerg-421	138	11	on	on	ADP
fuelectenerg-421	138	12	the	the	DET
fuelectenerg-421	138	13	frequency	frequency	NOUN
fuelectenerg-421	138	14	response	response	NOUN
fuelectenerg-421	138	15	of	of	ADP
fuelectenerg-421	138	16	the	the	DET
fuelectenerg-421	138	17	mems	mem	NOUN
fuelectenerg-421	138	18	microphone	microphone	NOUN
fuelectenerg-421	138	19	itself	itself	PRON
fuelectenerg-421	138	20	.	.	PUNCT
fuelectenerg-421	139	1	further	far	ADV
fuelectenerg-421	139	2	parameter	parameter	NOUN
fuelectenerg-421	139	3	that	that	PRON
fuelectenerg-421	139	4	expresses	express	VERB
fuelectenerg-421	139	5	the	the	DET
fuelectenerg-421	139	6	linearity	linearity	NOUN
fuelectenerg-421	139	7	of	of	ADP
fuelectenerg-421	139	8	the	the	DET
fuelectenerg-421	139	9	ri	ri	PROPN
fuelectenerg-421	139	10	circuit	circuit	NOUN
fuelectenerg-421	139	11	is	be	AUX
fuelectenerg-421	139	12	the	the	DET
fuelectenerg-421	139	13	total	total	ADJ
fuelectenerg-421	139	14	harmonic	harmonic	ADJ
fuelectenerg-421	139	15	distortion	distortion	NOUN
fuelectenerg-421	139	16	(	(	PUNCT
fuelectenerg-421	139	17	thd	thd	NOUN
fuelectenerg-421	139	18	)	)	PUNCT
fuelectenerg-421	139	19	,	,	PUNCT
fuelectenerg-421	139	20	which	which	PRON
fuelectenerg-421	139	21	depends	depend	VERB
fuelectenerg-421	139	22	on	on	ADP
fuelectenerg-421	139	23	the	the	DET
fuelectenerg-421	139	24	amplitude	amplitude	NOUN
fuelectenerg-421	139	25	of	of	ADP
fuelectenerg-421	139	26	the	the	DET
fuelectenerg-421	139	27	input	input	NOUN
fuelectenerg-421	139	28	signal	signal	NOUN
fuelectenerg-421	139	29	.	.	PUNCT
fuelectenerg-421	140	1	fig	fig	NOUN
fuelectenerg-421	140	2	.	.	PUNCT
fuelectenerg-421	141	1	5	5	NUM
fuelectenerg-421	141	2	shows	show	VERB
fuelectenerg-421	141	3	the	the	DET
fuelectenerg-421	141	4	dependence	dependence	NOUN
fuelectenerg-421	141	5	of	of	ADP
fuelectenerg-421	141	6	the	the	DET
fuelectenerg-421	141	7	thd	thd	NOUN
fuelectenerg-421	141	8	parameter	parameter	NOUN
fuelectenerg-421	141	9	on	on	ADP
fuelectenerg-421	141	10	the	the	DET
fuelectenerg-421	141	11	input	input	NOUN
fuelectenerg-421	141	12	amplitude	amplitude	NOUN
fuelectenerg-421	141	13	.	.	PUNCT
fuelectenerg-421	142	1	it	it	PRON
fuelectenerg-421	142	2	can	can	AUX
fuelectenerg-421	142	3	be	be	AUX
fuelectenerg-421	142	4	observed	observe	VERB
fuelectenerg-421	142	5	that	that	SCONJ
fuelectenerg-421	142	6	thd	thd	PROPN
fuelectenerg-421	142	7	will	will	AUX
fuelectenerg-421	142	8	be	be	AUX
fuelectenerg-421	142	9	lower	low	ADJ
fuelectenerg-421	142	10	than	than	ADP
fuelectenerg-421	142	11	0.1	0.1	NUM
fuelectenerg-421	142	12	%	%	NOUN
fuelectenerg-421	142	13	for	for	ADP
fuelectenerg-421	142	14	the	the	DET
fuelectenerg-421	142	15	input	input	NOUN
fuelectenerg-421	142	16	amplitude	amplitude	NOUN
fuelectenerg-421	142	17	in	in	ADP
fuelectenerg-421	142	18	the	the	DET
fuelectenerg-421	142	19	range	range	NOUN
fuelectenerg-421	142	20	from	from	ADP
fuelectenerg-421	142	21	100	100	NUM
fuelectenerg-421	142	22	v	v	NOUN
fuelectenerg-421	142	23	to	to	ADP
fuelectenerg-421	142	24	70	70	NUM
fuelectenerg-421	142	25	mv	mv	NOUN
fuelectenerg-421	142	26	.	.	PROPN
fuelectenerg-421	143	1	for	for	ADP
fuelectenerg-421	143	2	the	the	DET
fuelectenerg-421	143	3	input	input	NOUN
fuelectenerg-421	143	4	amplitude	amplitude	NOUN
fuelectenerg-421	143	5	over	over	ADP
fuelectenerg-421	143	6	70	70	NUM
fuelectenerg-421	143	7	mv	mv	PROPN
fuelectenerg-421	143	8	,	,	PUNCT
fuelectenerg-421	143	9	the	the	DET
fuelectenerg-421	143	10	thd	thd	NOUN
fuelectenerg-421	143	11	will	will	AUX
fuelectenerg-421	143	12	rapidly	rapidly	ADV
fuelectenerg-421	143	13	increase	increase	VERB
fuelectenerg-421	143	14	,	,	PUNCT
fuelectenerg-421	143	15	and	and	CCONJ
fuelectenerg-421	143	16	as	as	SCONJ
fuelectenerg-421	143	17	the	the	DET
fuelectenerg-421	143	18	input	input	NOUN
fuelectenerg-421	143	19	amplitude	amplitude	NOUN
fuelectenerg-421	143	20	reaches	reach	VERB
fuelectenerg-421	143	21	100	100	NUM
fuelectenerg-421	143	22	mv	mv	PROPN
fuelectenerg-421	143	23	the	the	DET
fuelectenerg-421	143	24	thd	thd	PROPN
fuelectenerg-421	143	25	of	of	ADP
fuelectenerg-421	143	26	whole	whole	ADJ
fuelectenerg-421	143	27	ri	ri	PROPN
fuelectenerg-421	143	28	will	will	AUX
fuelectenerg-421	143	29	be	be	AUX
fuelectenerg-421	143	30	about	about	ADP
fuelectenerg-421	143	31	0.6	0.6	NUM
fuelectenerg-421	143	32	%	%	NOUN
fuelectenerg-421	143	33	.	.	PUNCT
fuelectenerg-421	144	1	270	270	NUM
fuelectenerg-421	144	2	d.	d.	PROPN
fuelectenerg-421	144	3	arbet	arbet	PROPN
fuelectenerg-421	144	4	,	,	PUNCT
fuelectenerg-421	144	5	v.	v.	ADP
fuelectenerg-421	144	6	stopjaková	stopjaková	PROPN
fuelectenerg-421	144	7	,	,	PUNCT
fuelectenerg-421	144	8	m.	m.	NOUN
fuelectenerg-421	144	9	kováč	kováč	PROPN
fuelectenerg-421	144	10	,	,	PUNCT
fuelectenerg-421	144	11	l.	l.	PROPN
fuelectenerg-421	144	12	nagy	nagy	PROPN
fuelectenerg-421	144	13	,	,	PUNCT
fuelectenerg-421	144	14	g.	g.	PROPN
fuelectenerg-421	144	15	nagy	nagy	PROPN
fuelectenerg-421	144	16	1	1	NUM
fuelectenerg-421	144	17	10	10	NUM
fuelectenerg-421	144	18	100	100	NUM
fuelectenerg-421	144	19	1k	1k	NUM
fuelectenerg-421	144	20	10k	10k	NOUN
fuelectenerg-421	144	21	100k	100k	NUM
fuelectenerg-421	144	22	-10	-10	PUNCT
fuelectenerg-421	144	23	-5	-5	PUNCT
fuelectenerg-421	144	24	0	0	NUM
fuelectenerg-421	144	25	5	5	NUM
fuelectenerg-421	144	26	10	10	NUM
fuelectenerg-421	144	27	15	15	NUM
fuelectenerg-421	144	28	20	20	NUM
fuelectenerg-421	144	29	25	25	NUM
fuelectenerg-421	144	30	30	30	NUM
fuelectenerg-421	144	31	g	g	NOUN
fuelectenerg-421	144	32	a	a	DET
fuelectenerg-421	144	33	in	in	ADP
fuelectenerg-421	144	34	[	[	PUNCT
fuelectenerg-421	144	35	d	d	PROPN
fuelectenerg-421	144	36	b	b	PROPN
fuelectenerg-421	144	37	]	]	X
fuelectenerg-421	144	38	frequency	frequency	NOUN
fuelectenerg-421	144	39	[	[	X
fuelectenerg-421	144	40	hz	hz	X
fuelectenerg-421	144	41	]	]	X
fuelectenerg-421	144	42	min	min	PROPN
fuelectenerg-421	144	43	max	max	PROPN
fuelectenerg-421	144	44	fig	fig	PROPN
fuelectenerg-421	144	45	.	.	PUNCT
fuelectenerg-421	145	1	4	4	NUM
fuelectenerg-421	145	2	frequency	frequency	NOUN
fuelectenerg-421	145	3	response	response	NOUN
fuelectenerg-421	145	4	of	of	ADP
fuelectenerg-421	145	5	the	the	DET
fuelectenerg-421	145	6	ri	ri	PROPN
fuelectenerg-421	145	7	circuit	circuit	NOUN
fuelectenerg-421	145	8	the	the	DET
fuelectenerg-421	145	9	linearity	linearity	NOUN
fuelectenerg-421	145	10	of	of	ADP
fuelectenerg-421	145	11	the	the	DET
fuelectenerg-421	145	12	ri	ri	PROPN
fuelectenerg-421	145	13	can	can	AUX
fuelectenerg-421	145	14	also	also	ADV
fuelectenerg-421	145	15	be	be	AUX
fuelectenerg-421	145	16	observed	observe	VERB
fuelectenerg-421	145	17	from	from	ADP
fuelectenerg-421	145	18	fig	fig	NOUN
fuelectenerg-421	145	19	.	.	PUNCT
fuelectenerg-421	146	1	5	5	NUM
fuelectenerg-421	146	2	,	,	PUNCT
fuelectenerg-421	146	3	where	where	SCONJ
fuelectenerg-421	146	4	the	the	DET
fuelectenerg-421	146	5	dependence	dependence	NOUN
fuelectenerg-421	146	6	of	of	ADP
fuelectenerg-421	146	7	the	the	DET
fuelectenerg-421	146	8	output	output	NOUN
fuelectenerg-421	146	9	amplitude	amplitude	NOUN
fuelectenerg-421	146	10	on	on	ADP
fuelectenerg-421	146	11	the	the	DET
fuelectenerg-421	146	12	input	input	NOUN
fuelectenerg-421	146	13	amplitude	amplitude	NOUN
fuelectenerg-421	146	14	is	be	AUX
fuelectenerg-421	146	15	shown	show	VERB
fuelectenerg-421	146	16	.	.	PUNCT
fuelectenerg-421	147	1	since	since	SCONJ
fuelectenerg-421	147	2	the	the	DET
fuelectenerg-421	147	3	input	input	NOUN
fuelectenerg-421	147	4	range	range	NOUN
fuelectenerg-421	147	5	of	of	ADP
fuelectenerg-421	147	6	the	the	DET
fuelectenerg-421	147	7	sigmadelta	sigmadelta	NOUN
fuelectenerg-421	147	8	modulator	modulator	NOUN
fuelectenerg-421	147	9	is	be	AUX
fuelectenerg-421	147	10	from	from	ADP
fuelectenerg-421	147	11	0	0	NUM
fuelectenerg-421	147	12	v	v	NOUN
fuelectenerg-421	147	13	to	to	ADP
fuelectenerg-421	147	14	2	2	NUM
fuelectenerg-421	147	15	v	v	NOUN
fuelectenerg-421	147	16	,	,	PUNCT
fuelectenerg-421	147	17	one	one	PRON
fuelectenerg-421	147	18	can	can	AUX
fuelectenerg-421	147	19	observe	observe	VERB
fuelectenerg-421	147	20	that	that	SCONJ
fuelectenerg-421	147	21	in	in	ADP
fuelectenerg-421	147	22	the	the	DET
fuelectenerg-421	147	23	whole	whole	ADJ
fuelectenerg-421	147	24	considered	consider	VERB
fuelectenerg-421	147	25	range	range	NOUN
fuelectenerg-421	147	26	,	,	PUNCT
fuelectenerg-421	147	27	the	the	DET
fuelectenerg-421	147	28	proposed	propose	VERB
fuelectenerg-421	147	29	ri	ri	NOUN
fuelectenerg-421	147	30	exhibits	exhibit	VERB
fuelectenerg-421	147	31	good	good	ADJ
fuelectenerg-421	147	32	linearity	linearity	NOUN
fuelectenerg-421	147	33	.	.	PUNCT
fuelectenerg-421	148	1	0.00	0.00	NUM
fuelectenerg-421	148	2	0.02	0.02	NUM
fuelectenerg-421	148	3	0.04	0.04	NUM
fuelectenerg-421	148	4	0.06	0.06	NUM
fuelectenerg-421	148	5	0.08	0.08	NUM
fuelectenerg-421	148	6	0.10	0.10	NUM
fuelectenerg-421	148	7	0.0	0.0	NUM
fuelectenerg-421	148	8	0.4	0.4	NUM
fuelectenerg-421	148	9	0.8	0.8	NUM
fuelectenerg-421	148	10	1.2	1.2	NUM
fuelectenerg-421	148	11	1.6	1.6	NUM
fuelectenerg-421	148	12	2.0	2.0	NUM
fuelectenerg-421	148	13	o	o	NOUN
fuelectenerg-421	148	14	u	u	NOUN
fuelectenerg-421	148	15	p	p	PROPN
fuelectenerg-421	148	16	u	u	X
fuelectenerg-421	148	17	t	t	PROPN
fuelectenerg-421	148	18	a	a	DET
fuelectenerg-421	148	19	m	m	NOUN
fuelectenerg-421	148	20	p	p	NOUN
fuelectenerg-421	148	21	li	li	X
fuelectenerg-421	148	22	tu	tu	PROPN
fuelectenerg-421	148	23	d	d	X
fuelectenerg-421	148	24	e	e	PROPN
fuelectenerg-421	148	25	[	[	PUNCT
fuelectenerg-421	148	26	v	v	NOUN
fuelectenerg-421	148	27	]	]	PUNCT
fuelectenerg-421	148	28	input	input	NOUN
fuelectenerg-421	148	29	amplitude	amplitude	NOUN
fuelectenerg-421	148	30	[	[	X
fuelectenerg-421	148	31	v	v	X
fuelectenerg-421	148	32	]	]	X
fuelectenerg-421	148	33	vout	vout	NOUN
fuelectenerg-421	148	34	0.0	0.0	NUM
fuelectenerg-421	148	35	0.2	0.2	NUM
fuelectenerg-421	148	36	0.4	0.4	NUM
fuelectenerg-421	148	37	0.6	0.6	NUM
fuelectenerg-421	148	38	0.8	0.8	NUM
fuelectenerg-421	148	39	1.0	1.0	NUM
fuelectenerg-421	148	40	t	t	NOUN
fuelectenerg-421	148	41	h	h	NOUN
fuelectenerg-421	148	42	d	d	NOUN
fuelectenerg-421	148	43	[	[	PUNCT
fuelectenerg-421	148	44	%	%	X
fuelectenerg-421	148	45	]	]	X
fuelectenerg-421	148	46	thd	thd	ADJ
fuelectenerg-421	148	47	fig	fig	NOUN
fuelectenerg-421	148	48	.	.	PUNCT
fuelectenerg-421	149	1	5	5	NUM
fuelectenerg-421	149	2	output	output	NOUN
fuelectenerg-421	149	3	amplitude	amplitude	NOUN
fuelectenerg-421	149	4	and	and	CCONJ
fuelectenerg-421	149	5	thd	thd	NOUN
fuelectenerg-421	149	6	versus	versus	ADP
fuelectenerg-421	149	7	the	the	DET
fuelectenerg-421	149	8	input	input	NOUN
fuelectenerg-421	149	9	amplitude	amplitude	NOUN
fuelectenerg-421	149	10	the	the	DET
fuelectenerg-421	149	11	main	main	ADJ
fuelectenerg-421	149	12	achieved	achieve	VERB
fuelectenerg-421	149	13	parameters	parameter	NOUN
fuelectenerg-421	149	14	of	of	ADP
fuelectenerg-421	149	15	the	the	DET
fuelectenerg-421	149	16	designed	design	VERB
fuelectenerg-421	149	17	readoutfrontend	readoutfrontend	NOUN
fuelectenerg-421	149	18	circuit	circuit	NOUN
fuelectenerg-421	149	19	obtained	obtain	VERB
fuelectenerg-421	149	20	from	from	ADP
fuelectenerg-421	149	21	schematic	schematic	ADJ
fuelectenerg-421	149	22	as	as	ADV
fuelectenerg-421	149	23	well	well	ADV
fuelectenerg-421	149	24	as	as	ADP
fuelectenerg-421	149	25	postlayout	postlayout	NOUN
fuelectenerg-421	149	26	simulationsare	simulationsare	NOUN
fuelectenerg-421	149	27	summarized	summarize	VERB
fuelectenerg-421	149	28	in	in	ADP
fuelectenerg-421	149	29	tab	tab	NOUN
fuelectenerg-421	149	30	.	.	PUNCT
fuelectenerg-421	150	1	1	1	X
fuelectenerg-421	150	2	.	.	X
fuelectenerg-421	150	3	layout	layout	NOUN
fuelectenerg-421	150	4	of	of	ADP
fuelectenerg-421	150	5	the	the	DET
fuelectenerg-421	150	6	proposed	propose	VERB
fuelectenerg-421	150	7	readout	readout	NOUN
fuelectenerg-421	150	8	frontend	frontend	NOUN
fuelectenerg-421	150	9	circuit	circuit	NOUN
fuelectenerg-421	150	10	and	and	CCONJ
fuelectenerg-421	150	11	comparison	comparison	NOUN
fuelectenerg-421	150	12	of	of	ADP
fuelectenerg-421	150	13	the	the	DET
fuelectenerg-421	150	14	frequency	frequency	NOUN
fuelectenerg-421	150	15	responses	response	NOUN
fuelectenerg-421	150	16	obtained	obtain	VERB
fuelectenerg-421	150	17	from	from	ADP
fuelectenerg-421	150	18	schematic	schematic	ADJ
fuelectenerg-421	150	19	and	and	CCONJ
fuelectenerg-421	150	20	postlayout	postlayout	NOUN
fuelectenerg-421	150	21	simulations	simulation	NOUN
fuelectenerg-421	150	22	are	be	AUX
fuelectenerg-421	150	23	depicted	depict	VERB
fuelectenerg-421	150	24	in	in	ADP
fuelectenerg-421	150	25	fig	fig	NOUN
fuelectenerg-421	150	26	.	.	PUNCT
fuelectenerg-421	151	1	6a	6a	NOUN
fuelectenerg-421	151	2	and	and	CCONJ
fuelectenerg-421	151	3	fig	fig	NOUN
fuelectenerg-421	151	4	.	.	PUNCT
fuelectenerg-421	152	1	6b	6b	NOUN
fuelectenerg-421	152	2	,	,	PUNCT
fuelectenerg-421	152	3	respectively	respectively	ADV
fuelectenerg-421	152	4	.	.	PUNCT
fuelectenerg-421	153	1	in	in	ADP
fuelectenerg-421	153	2	fig	fig	NOUN
fuelectenerg-421	153	3	.	.	PUNCT
fuelectenerg-421	154	1	6a	6a	NOUN
fuelectenerg-421	154	2	,	,	PUNCT
fuelectenerg-421	154	3	the	the	DET
fuelectenerg-421	154	4	input	input	NOUN
fuelectenerg-421	154	5	conversion	conversion	NOUN
fuelectenerg-421	154	6	block	block	NOUN
fuelectenerg-421	154	7	is	be	AUX
fuelectenerg-421	154	8	marked	mark	VERB
fuelectenerg-421	154	9	.	.	PUNCT
fuelectenerg-421	155	1	from	from	ADP
fuelectenerg-421	155	2	tab	tab	PROPN
fuelectenerg-421	155	3	.	.	PROPN
fuelectenerg-421	155	4	1	1	NUM
fuelectenerg-421	155	5	and	and	CCONJ
fuelectenerg-421	155	6	fig	fig	NOUN
fuelectenerg-421	155	7	.	.	PUNCT
fuelectenerg-421	155	8	6b	6b	NOUN
fuelectenerg-421	155	9	,	,	PUNCT
fuelectenerg-421	155	10	one	one	PRON
fuelectenerg-421	155	11	can	can	AUX
fuelectenerg-421	155	12	observe	observe	VERB
fuelectenerg-421	155	13	that	that	SCONJ
fuelectenerg-421	155	14	the	the	DET
fuelectenerg-421	155	15	biggest	big	ADJ
fuelectenerg-421	155	16	change	change	NOUN
fuelectenerg-421	155	17	in	in	ADP
fuelectenerg-421	155	18	the	the	DET
fuelectenerg-421	155	19	frequency	frequency	NOUN
fuelectenerg-421	155	20	response	response	NOUN
fuelectenerg-421	155	21	was	be	AUX
fuelectenerg-421	155	22	achieved	achieve	VERB
fuelectenerg-421	155	23	at	at	ADP
fuelectenerg-421	155	24	higher	high	ADJ
fuelectenerg-421	155	25	design	design	NOUN
fuelectenerg-421	155	26	of	of	ADP
fuelectenerg-421	155	27	cmos	cmos	PROPN
fuelectenerg-421	155	28	readout	readout	PROPN
fuelectenerg-421	155	29	frontend	frontend	NOUN
fuelectenerg-421	155	30	circuit	circuit	NOUN
fuelectenerg-421	155	31	for	for	ADP
fuelectenerg-421	155	32	mems	mem	NOUN
fuelectenerg-421	155	33	capacitive	capacitive	ADJ
fuelectenerg-421	155	34	microphones	microphone	VERB
fuelectenerg-421	155	35	271	271	NUM
fuelectenerg-421	155	36	frequencies	frequency	NOUN
fuelectenerg-421	155	37	.	.	PUNCT
fuelectenerg-421	156	1	the	the	DET
fuelectenerg-421	156	2	high	high	ADJ
fuelectenerg-421	156	3	frequency	frequency	NOUN
fuelectenerg-421	156	4	corner	corner	NOUN
fuelectenerg-421	156	5	9.66	9.66	NUM
fuelectenerg-421	156	6	khz	khz	NOUN
fuelectenerg-421	156	7	was	be	AUX
fuelectenerg-421	156	8	achieved	achieve	VERB
fuelectenerg-421	156	9	,	,	PUNCT
fuelectenerg-421	156	10	which	which	PRON
fuelectenerg-421	156	11	represents	represent	VERB
fuelectenerg-421	156	12	about	about	ADP
fuelectenerg-421	156	13	10	10	NUM
fuelectenerg-421	156	14	%	%	NOUN
fuelectenerg-421	156	15	lower	low	ADJ
fuelectenerg-421	156	16	value	value	NOUN
fuelectenerg-421	156	17	compared	compare	VERB
fuelectenerg-421	156	18	to	to	ADP
fuelectenerg-421	156	19	the	the	DET
fuelectenerg-421	156	20	schematic	schematic	ADJ
fuelectenerg-421	156	21	simulation	simulation	NOUN
fuelectenerg-421	156	22	result	result	NOUN
fuelectenerg-421	156	23	.	.	PUNCT
fuelectenerg-421	157	1	other	other	ADJ
fuelectenerg-421	157	2	parameters	parameter	NOUN
fuelectenerg-421	157	3	either	either	CCONJ
fuelectenerg-421	157	4	slightly	slightly	ADV
fuelectenerg-421	157	5	change	change	VERB
fuelectenerg-421	157	6	or	or	CCONJ
fuelectenerg-421	157	7	maintain	maintain	VERB
fuelectenerg-421	157	8	their	their	PRON
fuelectenerg-421	157	9	original	original	ADJ
fuelectenerg-421	157	10	values	value	NOUN
fuelectenerg-421	157	11	.	.	PUNCT
fuelectenerg-421	158	1	table	table	NOUN
fuelectenerg-421	158	2	1	1	NUM
fuelectenerg-421	158	3	main	main	ADJ
fuelectenerg-421	158	4	parameters	parameter	NOUN
fuelectenerg-421	158	5	of	of	ADP
fuelectenerg-421	158	6	the	the	DET
fuelectenerg-421	158	7	proposed	propose	VERB
fuelectenerg-421	158	8	readout	readout	NOUN
fuelectenerg-421	158	9	frontend	frontend	NOUN
fuelectenerg-421	158	10	circuit	circuit	NOUN
fuelectenerg-421	158	11	parameter	parameter	NOUN
fuelectenerg-421	158	12	conditions	condition	NOUN
fuelectenerg-421	158	13	typical	typical	ADJ
fuelectenerg-421	158	14	postlayout	postlayout	NOUN
fuelectenerg-421	158	15	unit	unit	NOUN
fuelectenerg-421	158	16	maximum	maximum	ADJ
fuelectenerg-421	158	17	gain	gain	VERB
fuelectenerg-421	158	18	25.75	25.75	NUM
fuelectenerg-421	158	19	25.7	25.7	NUM
fuelectenerg-421	158	20	db	db	PROPN
fuelectenerg-421	158	21	frequency	frequency	NOUN
fuelectenerg-421	158	22	response	response	NOUN
fuelectenerg-421	158	23	low	low	ADJ
fuelectenerg-421	158	24	frequency	frequency	NOUN
fuelectenerg-421	158	25	-3	-3	PUNCT
fuelectenerg-421	158	26	db	db	PROPN
fuelectenerg-421	158	27	point	point	NOUN
fuelectenerg-421	158	28	25.75	25.75	NUM
fuelectenerg-421	158	29	25.6	25.6	NUM
fuelectenerg-421	158	30	hz	hz	PRON
fuelectenerg-421	158	31	high	high	ADJ
fuelectenerg-421	158	32	frequency	frequency	NOUN
fuelectenerg-421	158	33	-3	-3	PUNCT
fuelectenerg-421	158	34	db	db	PROPN
fuelectenerg-421	158	35	point	point	NOUN
fuelectenerg-421	158	36	10.66	10.66	NUM
fuelectenerg-421	158	37	9.66	9.66	NUM
fuelectenerg-421	158	38	khz	khz	NOUN
fuelectenerg-421	158	39	noise	noise	NOUN
fuelectenerg-421	158	40	input	input	NOUN
fuelectenerg-421	158	41	noise	noise	NOUN
fuelectenerg-421	158	42	@	@	ADP
fuelectenerg-421	158	43	1	1	NUM
fuelectenerg-421	158	44	khz	khz	NOUN
fuelectenerg-421	158	45	0.293	0.293	NUM
fuelectenerg-421	158	46	0.27	0.27	NUM
fuelectenerg-421	158	47	µv/√hz	µv/√hz	DET
fuelectenerg-421	158	48	output	output	NOUN
fuelectenerg-421	158	49	noise	noise	NOUN
fuelectenerg-421	158	50	@	@	ADP
fuelectenerg-421	158	51	1	1	NUM
fuelectenerg-421	158	52	khz	khz	NOUN
fuelectenerg-421	158	53	5.66	5.66	NUM
fuelectenerg-421	158	54	5.24	5.24	NUM
fuelectenerg-421	158	55	µv/√hz	µv/√hz	PUNCT
fuelectenerg-421	158	56	thd	thd	NOUN
fuelectenerg-421	158	57	0.099	0.099	NUM
fuelectenerg-421	158	58	0.096	0.096	NUM
fuelectenerg-421	158	59	%	%	NOUN
fuelectenerg-421	158	60	signal	signal	NOUN
fuelectenerg-421	158	61	to	to	PART
fuelectenerg-421	158	62	noise	noise	VERB
fuelectenerg-421	158	63	(	(	PUNCT
fuelectenerg-421	158	64	s	s	NOUN
fuelectenerg-421	158	65	/	/	SYM
fuelectenerg-421	158	66	n	n	CCONJ
fuelectenerg-421	158	67	)	)	PUNCT
fuelectenerg-421	158	68	68.76	68.76	NUM
fuelectenerg-421	158	69	68.31	68.31	NUM
fuelectenerg-421	159	1	db	db	PRON
fuelectenerg-421	159	2	dynamic	dynamic	ADJ
fuelectenerg-421	159	3	range	range	NOUN
fuelectenerg-421	159	4	(	(	PUNCT
fuelectenerg-421	159	5	dr	dr	PROPN
fuelectenerg-421	159	6	)	)	PUNCT
fuelectenerg-421	159	7	110.6	110.6	NUM
fuelectenerg-421	159	8	110.7	110.7	NUM
fuelectenerg-421	159	9	db	db	INTJ
fuelectenerg-421	159	10	idd	idd	ADJ
fuelectenerg-421	159	11	consumption	consumption	NOUN
fuelectenerg-421	159	12	of	of	ADP
fuelectenerg-421	159	13	selected	select	VERB
fuelectenerg-421	159	14	block	block	NOUN
fuelectenerg-421	159	15	input	input	NOUN
fuelectenerg-421	159	16	conversion	conversion	NOUN
fuelectenerg-421	159	17	block	block	NOUN
fuelectenerg-421	159	18	50	50	NUM
fuelectenerg-421	159	19	50	50	NUM
fuelectenerg-421	159	20	µa	µa	ADP
fuelectenerg-421	159	21	single	single	ADV
fuelectenerg-421	159	22	-	-	PUNCT
fuelectenerg-421	159	23	ended	ended	ADJ
fuelectenerg-421	159	24	to	to	PART
fuelectenerg-421	159	25	differential	differential	VERB
fuelectenerg-421	159	26	165	165	NUM
fuelectenerg-421	159	27	165	165	NUM
fuelectenerg-421	159	28	µa	µa	NOUN
fuelectenerg-421	159	29	2x	2x	NUM
fuelectenerg-421	159	30	amp	amp	PROPN
fuelectenerg-421	159	31	550	550	NUM
fuelectenerg-421	159	32	550	550	NUM
fuelectenerg-421	159	33	µa	µa	NOUN
fuelectenerg-421	159	34	filter	filter	NOUN
fuelectenerg-421	159	35	820	820	NUM
fuelectenerg-421	159	36	820	820	NUM
fuelectenerg-421	159	37	µa	µa	AUX
fuelectenerg-421	159	38	total	total	VERB
fuelectenerg-421	159	39	idd	idd	PROPN
fuelectenerg-421	159	40	consumption	consumption	NOUN
fuelectenerg-421	159	41	vdd	vdd	PROPN
fuelectenerg-421	159	42	=	=	PROPN
fuelectenerg-421	159	43	3v	3v	NUM
fuelectenerg-421	159	44	1.56	1.56	NUM
fuelectenerg-421	159	45	1.56	1.56	NUM
fuelectenerg-421	159	46	ma	ma	PROPN
fuelectenerg-421	159	47	1	1	NUM
fuelectenerg-421	159	48	10	10	NUM
fuelectenerg-421	159	49	100	100	NUM
fuelectenerg-421	159	50	1k	1k	NUM
fuelectenerg-421	159	51	10k	10k	NOUN
fuelectenerg-421	159	52	100k	100k	NUM
fuelectenerg-421	159	53	-5	-5	SYM
fuelectenerg-421	159	54	0	0	NUM
fuelectenerg-421	159	55	5	5	NUM
fuelectenerg-421	159	56	10	10	NUM
fuelectenerg-421	159	57	15	15	NUM
fuelectenerg-421	159	58	20	20	NUM
fuelectenerg-421	159	59	25	25	NUM
fuelectenerg-421	159	60	30	30	NUM
fuelectenerg-421	159	61	g	g	NOUN
fuelectenerg-421	159	62	a	a	PRON
fuelectenerg-421	159	63	in	in	ADP
fuelectenerg-421	159	64	[	[	PUNCT
fuelectenerg-421	159	65	d	d	PROPN
fuelectenerg-421	159	66	b	b	PROPN
fuelectenerg-421	159	67	]	]	X
fuelectenerg-421	159	68	frequency	frequency	NOUN
fuelectenerg-421	159	69	[	[	X
fuelectenerg-421	159	70	hz	hz	X
fuelectenerg-421	159	71	]	]	X
fuelectenerg-421	159	72	postlayout	postlayout	NOUN
fuelectenerg-421	159	73	schematic	schematic	ADJ
fuelectenerg-421	159	74	a	a	DET
fuelectenerg-421	159	75	)	)	PUNCT
fuelectenerg-421	159	76	layout	layout	NOUN
fuelectenerg-421	159	77	of	of	ADP
fuelectenerg-421	159	78	the	the	DET
fuelectenerg-421	159	79	readout	readout	NOUN
fuelectenerg-421	159	80	frontend	frontend	NOUN
fuelectenerg-421	159	81	b	b	NOUN
fuelectenerg-421	159	82	)	)	PUNCT
fuelectenerg-421	159	83	postlayout	postlayout	NOUN
fuelectenerg-421	159	84	vs	vs	ADP
fuelectenerg-421	159	85	schematic	schematic	ADJ
fuelectenerg-421	159	86	simulation	simulation	NOUN
fuelectenerg-421	159	87	results	result	VERB
fuelectenerg-421	159	88	fig	fig	NOUN
fuelectenerg-421	159	89	.	.	PUNCT
fuelectenerg-421	160	1	6	6	NUM
fuelectenerg-421	160	2	ri	ri	PROPN
fuelectenerg-421	160	3	layout	layout	NOUN
fuelectenerg-421	160	4	and	and	CCONJ
fuelectenerg-421	160	5	post	post	ADJ
fuelectenerg-421	160	6	-	-	ADJ
fuelectenerg-421	160	7	layout	layout	ADJ
fuelectenerg-421	160	8	simulation	simulation	NOUN
fuelectenerg-421	160	9	results	result	VERB
fuelectenerg-421	160	10	272	272	NUM
fuelectenerg-421	160	11	d.	d.	PROPN
fuelectenerg-421	160	12	arbet	arbet	PROPN
fuelectenerg-421	160	13	,	,	PUNCT
fuelectenerg-421	160	14	v.	v.	ADP
fuelectenerg-421	160	15	stopjaková	stopjaková	PROPN
fuelectenerg-421	160	16	,	,	PUNCT
fuelectenerg-421	160	17	m.	m.	NOUN
fuelectenerg-421	160	18	kováč	kováč	PROPN
fuelectenerg-421	160	19	,	,	PUNCT
fuelectenerg-421	160	20	l.	l.	PROPN
fuelectenerg-421	160	21	nagy	nagy	PROPN
fuelectenerg-421	160	22	,	,	PUNCT
fuelectenerg-421	160	23	g.	g.	PROPN
fuelectenerg-421	160	24	nagy	nagy	PROPN
fuelectenerg-421	160	25	comparison	comparison	NOUN
fuelectenerg-421	160	26	of	of	ADP
fuelectenerg-421	160	27	the	the	DET
fuelectenerg-421	160	28	achieved	achieve	VERB
fuelectenerg-421	160	29	results	result	NOUN
fuelectenerg-421	160	30	to	to	ADP
fuelectenerg-421	160	31	other	other	ADJ
fuelectenerg-421	160	32	works	work	NOUN
fuelectenerg-421	160	33	is	be	AUX
fuelectenerg-421	160	34	presented	present	VERB
fuelectenerg-421	160	35	in	in	ADP
fuelectenerg-421	160	36	tab.2	tab.2	PROPN
fuelectenerg-421	160	37	.	.	PUNCT
fuelectenerg-421	161	1	table	table	NOUN
fuelectenerg-421	161	2	2	2	NUM
fuelectenerg-421	161	3	comparison	comparison	NOUN
fuelectenerg-421	161	4	of	of	ADP
fuelectenerg-421	161	5	the	the	DET
fuelectenerg-421	161	6	achieved	achieve	VERB
fuelectenerg-421	161	7	results	result	NOUN
fuelectenerg-421	161	8	sc	sc	PROPN
fuelectenerg-421	161	9	switching	switching	NOUN
fuelectenerg-421	161	10	capacitors	capacitor	NOUN
fuelectenerg-421	161	11	,	,	PUNCT
fuelectenerg-421	161	12	se	se	ADV
fuelectenerg-421	161	13	:	:	PUNCT
fuelectenerg-421	161	14	single	single	ADJ
fuelectenerg-421	161	15	ended	end	VERB
fuelectenerg-421	161	16	,	,	PUNCT
fuelectenerg-421	161	17	de	de	ADP
fuelectenerg-421	161	18	:	:	PUNCT
fuelectenerg-421	161	19	differential	differential	NOUN
fuelectenerg-421	161	20	ended	end	VERB
fuelectenerg-421	161	21	,	,	PUNCT
fuelectenerg-421	161	22	dr	dr	PROPN
fuelectenerg-421	161	23	:	:	PUNCT
fuelectenerg-421	161	24	dynamic	dynamic	ADJ
fuelectenerg-421	161	25	range	range	NOUN
fuelectenerg-421	161	26	,	,	PUNCT
fuelectenerg-421	161	27	cv	cv	ADJ
fuelectenerg-421	161	28	:	:	PUNCT
fuelectenerg-421	161	29	constant	constant	ADJ
fuelectenerg-421	161	30	voltage	voltage	NOUN
fuelectenerg-421	161	31	,	,	PUNCT
fuelectenerg-421	161	32	cc	cc	NOUN
fuelectenerg-421	161	33	:	:	PUNCT
fuelectenerg-421	161	34	constant	constant	ADJ
fuelectenerg-421	161	35	charge	charge	NOUN
fuelectenerg-421	161	36	nevertheless	nevertheless	ADV
fuelectenerg-421	161	37	,	,	PUNCT
fuelectenerg-421	161	38	it	it	PRON
fuelectenerg-421	161	39	is	be	AUX
fuelectenerg-421	161	40	important	important	ADJ
fuelectenerg-421	161	41	to	to	PART
fuelectenerg-421	161	42	note	note	VERB
fuelectenerg-421	161	43	that	that	SCONJ
fuelectenerg-421	161	44	the	the	DET
fuelectenerg-421	161	45	other	other	ADJ
fuelectenerg-421	161	46	works	work	NOUN
fuelectenerg-421	161	47	are	be	AUX
fuelectenerg-421	161	48	based	base	VERB
fuelectenerg-421	161	49	on	on	ADP
fuelectenerg-421	161	50	different	different	ADJ
fuelectenerg-421	161	51	approaches	approach	NOUN
fuelectenerg-421	161	52	,	,	PUNCT
fuelectenerg-421	161	53	so	so	SCONJ
fuelectenerg-421	161	54	the	the	DET
fuelectenerg-421	161	55	comparison	comparison	NOUN
fuelectenerg-421	161	56	might	might	AUX
fuelectenerg-421	161	57	not	not	PART
fuelectenerg-421	161	58	be	be	AUX
fuelectenerg-421	161	59	fully	fully	ADV
fuelectenerg-421	161	60	relevant	relevant	ADJ
fuelectenerg-421	161	61	.	.	PUNCT
fuelectenerg-421	162	1	thus	thus	ADV
fuelectenerg-421	162	2	,	,	PUNCT
fuelectenerg-421	162	3	we	we	PRON
fuelectenerg-421	162	4	also	also	ADV
fuelectenerg-421	162	5	specify	specify	VERB
fuelectenerg-421	162	6	the	the	DET
fuelectenerg-421	162	7	approach	approach	NOUN
fuelectenerg-421	162	8	,	,	PUNCT
fuelectenerg-421	162	9	which	which	PRON
fuelectenerg-421	162	10	the	the	DET
fuelectenerg-421	162	11	respective	respective	ADJ
fuelectenerg-421	162	12	design	design	NOUN
fuelectenerg-421	162	13	is	be	AUX
fuelectenerg-421	162	14	employing	employ	VERB
fuelectenerg-421	162	15	.	.	PUNCT
fuelectenerg-421	163	1	as	as	SCONJ
fuelectenerg-421	163	2	can	can	AUX
fuelectenerg-421	163	3	be	be	AUX
fuelectenerg-421	163	4	observed	observe	VERB
fuelectenerg-421	163	5	,	,	PUNCT
fuelectenerg-421	163	6	in	in	ADP
fuelectenerg-421	163	7	our	our	PRON
fuelectenerg-421	163	8	case	case	NOUN
fuelectenerg-421	163	9	,	,	PUNCT
fuelectenerg-421	163	10	the	the	DET
fuelectenerg-421	163	11	best	good	ADJ
fuelectenerg-421	163	12	result	result	NOUN
fuelectenerg-421	163	13	was	be	AUX
fuelectenerg-421	163	14	achieved	achieve	VERB
fuelectenerg-421	163	15	for	for	ADP
fuelectenerg-421	163	16	the	the	DET
fuelectenerg-421	163	17	dynamic	dynamic	ADJ
fuelectenerg-421	163	18	range	range	NOUN
fuelectenerg-421	163	19	(	(	PUNCT
fuelectenerg-421	163	20	dr	dr	PROPN
fuelectenerg-421	163	21	)	)	PUNCT
fuelectenerg-421	163	22	parameter	parameter	NOUN
fuelectenerg-421	163	23	,	,	PUNCT
fuelectenerg-421	163	24	where	where	SCONJ
fuelectenerg-421	163	25	110db	110db	PROPN
fuelectenerg-421	163	26	is	be	AUX
fuelectenerg-421	163	27	achieved	achieve	VERB
fuelectenerg-421	163	28	as	as	SCONJ
fuelectenerg-421	163	29	required	require	VERB
fuelectenerg-421	163	30	by	by	ADP
fuelectenerg-421	163	31	the	the	DET
fuelectenerg-421	163	32	target	target	NOUN
fuelectenerg-421	163	33	application	application	NOUN
fuelectenerg-421	163	34	.	.	PUNCT
fuelectenerg-421	164	1	moreover	moreover	ADV
fuelectenerg-421	164	2	,	,	PUNCT
fuelectenerg-421	164	3	sensitivity	sensitivity	NOUN
fuelectenerg-421	164	4	and	and	CCONJ
fuelectenerg-421	164	5	input	input	NOUN
fuelectenerg-421	164	6	noise	noise	NOUN
fuelectenerg-421	164	7	as	as	ADV
fuelectenerg-421	164	8	well	well	ADV
fuelectenerg-421	164	9	as	as	ADP
fuelectenerg-421	164	10	the	the	DET
fuelectenerg-421	164	11	noise	noise	NOUN
fuelectenerg-421	164	12	floor	floor	NOUN
fuelectenerg-421	164	13	obtained	obtain	VERB
fuelectenerg-421	164	14	by	by	ADP
fuelectenerg-421	164	15	this	this	DET
fuelectenerg-421	164	16	approach	approach	NOUN
fuelectenerg-421	164	17	are	be	AUX
fuelectenerg-421	164	18	better	well	ADJ
fuelectenerg-421	164	19	than	than	ADP
fuelectenerg-421	164	20	those	those	PRON
fuelectenerg-421	164	21	presented	present	VERB
fuelectenerg-421	164	22	in	in	ADP
fuelectenerg-421	164	23	[	[	X
fuelectenerg-421	164	24	31	31	NUM
fuelectenerg-421	164	25	]	]	PUNCT
fuelectenerg-421	164	26	.	.	PUNCT
fuelectenerg-421	165	1	the	the	DET
fuelectenerg-421	165	2	proposed	propose	VERB
fuelectenerg-421	165	3	readout	readout	NOUN
fuelectenerg-421	165	4	circuit	circuit	NOUN
fuelectenerg-421	165	5	requires	require	VERB
fuelectenerg-421	165	6	smaller	small	ADJ
fuelectenerg-421	165	7	chip	chip	NOUN
fuelectenerg-421	165	8	area	area	NOUN
fuelectenerg-421	165	9	than	than	ADP
fuelectenerg-421	165	10	in	in	ADP
fuelectenerg-421	165	11	approaches	approach	NOUN
fuelectenerg-421	165	12	presented	present	VERB
fuelectenerg-421	165	13	in	in	ADP
fuelectenerg-421	165	14	[	[	X
fuelectenerg-421	165	15	29	29	NUM
fuelectenerg-421	165	16	]	]	PUNCT
fuelectenerg-421	165	17	and	and	CCONJ
fuelectenerg-421	165	18	[	[	X
fuelectenerg-421	165	19	30]by	30]by	NUM
fuelectenerg-421	165	20	18	18	NUM
fuelectenerg-421	165	21	%	%	NOUN
fuelectenerg-421	165	22	and	and	CCONJ
fuelectenerg-421	165	23	23	23	NUM
fuelectenerg-421	165	24	%	%	NOUN
fuelectenerg-421	165	25	higher	high	ADJ
fuelectenerg-421	165	26	than	than	ADP
fuelectenerg-421	165	27	[	[	X
fuelectenerg-421	165	28	27	27	NUM
fuelectenerg-421	165	29	]	]	PUNCT
fuelectenerg-421	165	30	and	and	CCONJ
fuelectenerg-421	165	31	[	[	X
fuelectenerg-421	165	32	31	31	NUM
fuelectenerg-421	165	33	]	]	PUNCT
fuelectenerg-421	165	34	,	,	PUNCT
fuelectenerg-421	165	35	respectively	respectively	ADV
fuelectenerg-421	165	36	.	.	PUNCT
fuelectenerg-421	166	1	finally	finally	ADV
fuelectenerg-421	166	2	,	,	PUNCT
fuelectenerg-421	166	3	in	in	ADP
fuelectenerg-421	166	4	comparison	comparison	NOUN
fuelectenerg-421	166	5	to	to	ADP
fuelectenerg-421	166	6	other	other	ADJ
fuelectenerg-421	166	7	works	work	NOUN
fuelectenerg-421	166	8	,	,	PUNCT
fuelectenerg-421	166	9	the	the	DET
fuelectenerg-421	166	10	most	most	ADV
fuelectenerg-421	166	11	important	important	ADJ
fuelectenerg-421	166	12	improvements	improvement	NOUN
fuelectenerg-421	166	13	and	and	CCONJ
fuelectenerg-421	166	14	features	feature	NOUN
fuelectenerg-421	166	15	of	of	ADP
fuelectenerg-421	166	16	the	the	DET
fuelectenerg-421	166	17	presented	present	VERB
fuelectenerg-421	166	18	readout	readout	NOUN
fuelectenerg-421	166	19	frontend	frontend	NOUN
fuelectenerg-421	166	20	circuitry	circuitry	NOUN
fuelectenerg-421	166	21	can	can	AUX
fuelectenerg-421	166	22	be	be	AUX
fuelectenerg-421	166	23	summarized	summarize	VERB
fuelectenerg-421	166	24	as	as	SCONJ
fuelectenerg-421	166	25	follows	follow	VERB
fuelectenerg-421	166	26	:	:	PUNCT
fuelectenerg-421	167	1			X
fuelectenerg-421	167	2	broader	broad	ADJ
fuelectenerg-421	167	3	dynamic	dynamic	ADJ
fuelectenerg-421	167	4	range	range	NOUN
fuelectenerg-421	167	5			X
fuelectenerg-421	167	6	better	well	ADJ
fuelectenerg-421	167	7	noise	noise	NOUN
fuelectenerg-421	167	8	performance	performance	NOUN
fuelectenerg-421	167	9			X
fuelectenerg-421	167	10	low	low	ADJ
fuelectenerg-421	167	11	power	power	NOUN
fuelectenerg-421	167	12	consumption	consumption	NOUN
fuelectenerg-421	167	13	however	however	ADV
fuelectenerg-421	167	14	,	,	PUNCT
fuelectenerg-421	167	15	these	these	DET
fuelectenerg-421	167	16	features	feature	NOUN
fuelectenerg-421	167	17	are	be	AUX
fuelectenerg-421	167	18	achieved	achieve	VERB
fuelectenerg-421	167	19	at	at	ADP
fuelectenerg-421	167	20	costs	cost	NOUN
fuelectenerg-421	167	21	of	of	ADP
fuelectenerg-421	167	22	area	area	NOUN
fuelectenerg-421	167	23	overhead	overhead	ADV
fuelectenerg-421	167	24	(	(	PUNCT
fuelectenerg-421	167	25	about	about	ADV
fuelectenerg-421	167	26	20	20	NUM
fuelectenerg-421	167	27	%	%	NOUN
fuelectenerg-421	167	28	with	with	ADP
fuelectenerg-421	167	29	respect	respect	NOUN
fuelectenerg-421	167	30	to	to	ADP
fuelectenerg-421	167	31	works	work	NOUN
fuelectenerg-421	167	32	presented	present	VERB
fuelectenerg-421	167	33	in	in	ADP
fuelectenerg-421	167	34	[	[	X
fuelectenerg-421	167	35	27	27	NUM
fuelectenerg-421	167	36	]	]	PUNCT
fuelectenerg-421	167	37	and	and	CCONJ
fuelectenerg-421	167	38	[	[	X
fuelectenerg-421	167	39	31	31	NUM
fuelectenerg-421	167	40	]	]	PUNCT
fuelectenerg-421	167	41	)	)	PUNCT
fuelectenerg-421	167	42	.	.	PUNCT
fuelectenerg-421	168	1	5	5	X
fuelectenerg-421	168	2	.	.	X
fuelectenerg-421	168	3	conclusion	conclusion	NOUN
fuelectenerg-421	168	4	the	the	DET
fuelectenerg-421	168	5	frontend	frontend	NOUN
fuelectenerg-421	168	6	part	part	NOUN
fuelectenerg-421	168	7	of	of	ADP
fuelectenerg-421	168	8	the	the	DET
fuelectenerg-421	168	9	readout	readout	NOUN
fuelectenerg-421	168	10	interface	interface	NOUN
fuelectenerg-421	168	11	for	for	ADP
fuelectenerg-421	168	12	mcm	mcm	PROPN
fuelectenerg-421	168	13	was	be	AUX
fuelectenerg-421	168	14	proposed	propose	VERB
fuelectenerg-421	168	15	and	and	CCONJ
fuelectenerg-421	168	16	designed	design	VERB
fuelectenerg-421	168	17	in	in	ADP
fuelectenerg-421	168	18	a	a	DET
fuelectenerg-421	168	19	standard	standard	ADJ
fuelectenerg-421	168	20	0.35	0.35	NUM
fuelectenerg-421	168	21	m	m	PROPN
fuelectenerg-421	168	22	cmos	cmos	NOUN
fuelectenerg-421	168	23	technology	technology	NOUN
fuelectenerg-421	168	24	.	.	PUNCT
fuelectenerg-421	169	1	the	the	DET
fuelectenerg-421	169	2	achieved	achieve	VERB
fuelectenerg-421	169	3	results	result	NOUN
fuelectenerg-421	169	4	show	show	VERB
fuelectenerg-421	169	5	that	that	SCONJ
fuelectenerg-421	169	6	the	the	DET
fuelectenerg-421	169	7	proposed	propose	VERB
fuelectenerg-421	169	8	approach	approach	NOUN
fuelectenerg-421	169	9	brings	bring	VERB
fuelectenerg-421	169	10	the	the	DET
fuelectenerg-421	169	11	high	high	ADJ
fuelectenerg-421	169	12	dynamic	dynamic	ADJ
fuelectenerg-421	169	13	range	range	NOUN
fuelectenerg-421	169	14	and	and	CCONJ
fuelectenerg-421	169	15	very	very	ADV
fuelectenerg-421	169	16	good	good	ADJ
fuelectenerg-421	169	17	noise	noise	NOUN
fuelectenerg-421	169	18	performance	performance	NOUN
fuelectenerg-421	169	19	,	,	PUNCT
fuelectenerg-421	169	20	which	which	PRON
fuelectenerg-421	169	21	are	be	AUX
fuelectenerg-421	169	22	the	the	DET
fuelectenerg-421	169	23	most	most	ADV
fuelectenerg-421	169	24	important	important	ADJ
fuelectenerg-421	169	25	parameters	parameter	NOUN
fuelectenerg-421	169	26	required	require	VERB
fuelectenerg-421	169	27	by	by	ADP
fuelectenerg-421	169	28	a	a	DET
fuelectenerg-421	169	29	mcm	mcm	PROPN
fuelectenerg-421	169	30	-	-	PUNCT
fuelectenerg-421	169	31	based	base	VERB
fuelectenerg-421	169	32	noise	noise	NOUN
fuelectenerg-421	169	33	dosimeter	dosimeter	NOUN
fuelectenerg-421	169	34	meant	mean	VERB
fuelectenerg-421	169	35	to	to	PART
fuelectenerg-421	169	36	be	be	AUX
fuelectenerg-421	169	37	used	use	VERB
fuelectenerg-421	169	38	in	in	ADP
fuelectenerg-421	169	39	very	very	ADV
fuelectenerg-421	169	40	harsh	harsh	ADJ
fuelectenerg-421	169	41	environment	environment	NOUN
fuelectenerg-421	169	42	.	.	PUNCT
fuelectenerg-421	170	1	[	[	X
fuelectenerg-421	170	2	27	27	NUM
fuelectenerg-421	170	3	]	]	X
fuelectenerg-421	170	4	[	[	X
fuelectenerg-421	170	5	29	29	NUM
fuelectenerg-421	170	6	]	]	X
fuelectenerg-421	171	1	[	[	X
fuelectenerg-421	171	2	30	30	NUM
fuelectenerg-421	171	3	]	]	X
fuelectenerg-421	172	1	[	[	X
fuelectenerg-421	172	2	31	31	NUM
fuelectenerg-421	172	3	]	]	PUNCT
fuelectenerg-421	172	4	this	this	DET
fuelectenerg-421	172	5	work	work	NOUN
fuelectenerg-421	172	6	cmos	cmos	PROPN
fuelectenerg-421	172	7	process	process	NOUN
fuelectenerg-421	172	8	0.35	0.35	NUM
fuelectenerg-421	172	9	μm	μm	NOUN
fuelectenerg-421	172	10	0.35	0.35	NUM
fuelectenerg-421	172	11	μm	μm	NOUN
fuelectenerg-421	172	12	0.8	0.8	NUM
fuelectenerg-421	172	13	μm	μm	NUM
fuelectenerg-421	172	14	0.8	0.8	NUM
fuelectenerg-421	172	15	μm	μm	NUM
fuelectenerg-421	172	16	0.35	0.35	NUM
fuelectenerg-421	172	17	μm	μm	NUM
fuelectenerg-421	172	18	supply	supply	NOUN
fuelectenerg-421	172	19	±	±	NUM
fuelectenerg-421	172	20	1.65	1.65	NUM
fuelectenerg-421	172	21	v	v	ADP
fuelectenerg-421	172	22	3.3	3.3	NUM
fuelectenerg-421	172	23	v	v	NUM
fuelectenerg-421	172	24	5	5	NUM
fuelectenerg-421	172	25	v	v	NUM
fuelectenerg-421	172	26	5	5	NUM
fuelectenerg-421	172	27	v	v	ADP
fuelectenerg-421	172	28	3	3	NUM
fuelectenerg-421	172	29	v	v	NOUN
fuelectenerg-421	172	30	power	power	NOUN
fuelectenerg-421	172	31	7.9	7.9	NUM
fuelectenerg-421	172	32	mw	mw	NOUN
fuelectenerg-421	172	33	n	n	CCONJ
fuelectenerg-421	172	34	/	/	SYM
fuelectenerg-421	172	35	a	a	DET
fuelectenerg-421	172	36	8.38	8.38	NUM
fuelectenerg-421	172	37	mw	mw	NOUN
fuelectenerg-421	172	38	0.56	0.56	NUM
fuelectenerg-421	172	39	mw	mw	PROPN
fuelectenerg-421	172	40	4.68	4.68	NUM
fuelectenerg-421	172	41	mw	mw	PROPN
fuelectenerg-421	172	42	area	area	NOUN
fuelectenerg-421	172	43	0.24	0.24	NUM
fuelectenerg-421	172	44	mm	mm	NOUN
fuelectenerg-421	172	45	2	2	NUM
fuelectenerg-421	172	46	12	12	NUM
fuelectenerg-421	172	47	mm	mm	NOUN
fuelectenerg-421	172	48	2	2	NUM
fuelectenerg-421	172	49	1.21	1.21	NUM
fuelectenerg-421	172	50	mm	mm	NOUN
fuelectenerg-421	172	51	2	2	NUM
fuelectenerg-421	172	52	0.22	0.22	NUM
fuelectenerg-421	172	53	mm	mm	NOUN
fuelectenerg-421	172	54	2	2	NUM
fuelectenerg-421	172	55	0.29	0.29	NUM
fuelectenerg-421	172	56	mm	mm	NUM
fuelectenerg-421	172	57	2	2	NUM
fuelectenerg-421	172	58	peak	peak	NOUN
fuelectenerg-421	172	59	sndr	sndr	NOUN
fuelectenerg-421	172	60	/	/	SYM
fuelectenerg-421	172	61	dr	dr	PROPN
fuelectenerg-421	172	62	91.7	91.7	NUM
fuelectenerg-421	172	63	db	db	PROPN
fuelectenerg-421	172	64	n	n	CCONJ
fuelectenerg-421	172	65	/	/	SYM
fuelectenerg-421	172	66	a	a	DET
fuelectenerg-421	172	67	60	60	NUM
fuelectenerg-421	172	68	db	db	PROPN
fuelectenerg-421	172	69	n	n	CCONJ
fuelectenerg-421	172	70	/	/	SYM
fuelectenerg-421	172	71	a	a	DET
fuelectenerg-421	172	72	110.66	110.66	NUM
fuelectenerg-421	172	73	db	db	PROPN
fuelectenerg-421	172	74	noise	noise	NOUN
fuelectenerg-421	172	75	floor	floor	NOUN
fuelectenerg-421	172	76	n	n	CCONJ
fuelectenerg-421	172	77	/	/	SYM
fuelectenerg-421	172	78	a	a	DET
fuelectenerg-421	172	79	n	n	NOUN
fuelectenerg-421	172	80	/	/	SYM
fuelectenerg-421	172	81	a	a	DET
fuelectenerg-421	172	82	n	n	CCONJ
fuelectenerg-421	172	83	/	/	SYM
fuelectenerg-421	172	84	a	a	DET
fuelectenerg-421	172	85	0.25	0.25	NUM
fuelectenerg-421	172	86	af/√hz	af/√hz	NOUN
fuelectenerg-421	172	87	(	(	PUNCT
fuelectenerg-421	172	88	500hz	500hz	NOUN
fuelectenerg-421	172	89	)	)	PUNCT
fuelectenerg-421	172	90	0.09	0.09	NUM
fuelectenerg-421	172	91	af/√hz	af/√hz	PROPN
fuelectenerg-421	172	92	(	(	PUNCT
fuelectenerg-421	172	93	1khz	1khz	X
fuelectenerg-421	172	94	)	)	PUNCT
fuelectenerg-421	172	95	adjustable	adjustable	ADJ
fuelectenerg-421	172	96	gain	gain	NOUN
fuelectenerg-421	172	97	yes	yes	INTJ
fuelectenerg-421	172	98	(	(	PUNCT
fuelectenerg-421	172	99	by	by	ADP
fuelectenerg-421	172	100	drive	drive	NOUN
fuelectenerg-421	172	101	current	current	ADJ
fuelectenerg-421	172	102	)	)	PUNCT
fuelectenerg-421	173	1	no	no	INTJ
fuelectenerg-421	173	2	no	no	INTJ
fuelectenerg-421	173	3	no	no	INTJ
fuelectenerg-421	173	4	no	no	DET
fuelectenerg-421	173	5	sensitivity	sensitivity	NOUN
fuelectenerg-421	173	6	0.1vnorm/1pf	0.1vnorm/1pf	NUM
fuelectenerg-421	173	7	38	38	NUM
fuelectenerg-421	173	8	μsec	μsec	NOUN
fuelectenerg-421	173	9	/	/	SYM
fuelectenerg-421	173	10	pf	pf	PROPN
fuelectenerg-421	173	11	9980	9980	NUM
fuelectenerg-421	173	12	mv	mv	PROPN
fuelectenerg-421	173	13	/	/	PROPN
fuelectenerg-421	173	14	ff	ff	PROPN
fuelectenerg-421	173	15	12.42	12.42	NUM
fuelectenerg-421	173	16	mv	mv	PROPN
fuelectenerg-421	173	17	/	/	PROPN
fuelectenerg-421	173	18	ff	ff	NOUN
fuelectenerg-421	173	19	62.6	62.6	NUM
fuelectenerg-421	173	20	mv	mv	NOUN
fuelectenerg-421	173	21	/	/	SYM
fuelectenerg-421	173	22	ff	ff	PROPN
fuelectenerg-421	173	23	output	output	NOUN
fuelectenerg-421	173	24	swing	swing	NOUN
fuelectenerg-421	173	25	n	n	CCONJ
fuelectenerg-421	173	26	/	/	SYM
fuelectenerg-421	173	27	a	a	DET
fuelectenerg-421	173	28	n	n	NOUN
fuelectenerg-421	173	29	/	/	SYM
fuelectenerg-421	173	30	a	a	PRON
fuelectenerg-421	173	31	n	n	NOUN
fuelectenerg-421	173	32	/	/	SYM
fuelectenerg-421	173	33	a	a	DET
fuelectenerg-421	173	34	n	n	CCONJ
fuelectenerg-421	173	35	/	/	SYM
fuelectenerg-421	173	36	a	a	DET
fuelectenerg-421	173	37	se	se	NOUN
fuelectenerg-421	173	38	:	:	PUNCT
fuelectenerg-421	173	39	1.9	1.9	NUM
fuelectenerg-421	173	40	v	v	X
fuelectenerg-421	173	41	de	de	X
fuelectenerg-421	173	42	:	:	PUNCT
fuelectenerg-421	173	43	3.8	3.8	NUM
fuelectenerg-421	173	44	v	v	NOUN
fuelectenerg-421	173	45	approach	approach	NOUN
fuelectenerg-421	173	46	cv	cv	PROPN
fuelectenerg-421	173	47	with	with	ADP
fuelectenerg-421	173	48	ac	ac	PROPN
fuelectenerg-421	173	49	drive	drive	PROPN
fuelectenerg-421	173	50	current	current	ADJ
fuelectenerg-421	173	51	semi	semi	ADJ
fuelectenerg-421	173	52	-	-	ADJ
fuelectenerg-421	173	53	digital	digital	ADJ
fuelectenerg-421	173	54	(	(	PUNCT
fuelectenerg-421	173	55	pwm	pwm	NOUN
fuelectenerg-421	173	56	)	)	PUNCT
fuelectenerg-421	173	57	sc	sc	PROPN
fuelectenerg-421	173	58	sc	sc	PROPN
fuelectenerg-421	173	59	cc	cc	PROPN
fuelectenerg-421	173	60	design	design	PROPN
fuelectenerg-421	173	61	of	of	ADP
fuelectenerg-421	173	62	cmos	cmos	PROPN
fuelectenerg-421	173	63	readout	readout	PROPN
fuelectenerg-421	173	64	frontend	frontend	NOUN
fuelectenerg-421	173	65	circuit	circuit	NOUN
fuelectenerg-421	173	66	for	for	ADP
fuelectenerg-421	173	67	mems	mem	NOUN
fuelectenerg-421	173	68	capacitive	capacitive	ADJ
fuelectenerg-421	173	69	microphones	microphone	NOUN
fuelectenerg-421	173	70	273	273	NUM
fuelectenerg-421	173	71	currently	currently	ADV
fuelectenerg-421	173	72	,	,	PUNCT
fuelectenerg-421	173	73	the	the	DET
fuelectenerg-421	173	74	developed	develop	VERB
fuelectenerg-421	173	75	readout	readout	NOUN
fuelectenerg-421	173	76	interface	interface	NOUN
fuelectenerg-421	173	77	is	be	AUX
fuelectenerg-421	173	78	being	be	AUX
fuelectenerg-421	173	79	fabricated	fabricate	VERB
fuelectenerg-421	173	80	.	.	PUNCT
fuelectenerg-421	174	1	in	in	ADP
fuelectenerg-421	174	2	the	the	DET
fuelectenerg-421	174	3	future	future	ADJ
fuelectenerg-421	174	4	research	research	NOUN
fuelectenerg-421	174	5	,	,	PUNCT
fuelectenerg-421	174	6	evaluation	evaluation	NOUN
fuelectenerg-421	174	7	of	of	ADP
fuelectenerg-421	174	8	prototype	prototype	NOUN
fuelectenerg-421	174	9	chips	chip	NOUN
fuelectenerg-421	174	10	will	will	AUX
fuelectenerg-421	174	11	be	be	AUX
fuelectenerg-421	174	12	performed	perform	VERB
fuelectenerg-421	174	13	and	and	CCONJ
fuelectenerg-421	174	14	possible	possible	ADJ
fuelectenerg-421	174	15	modification	modification	NOUN
fuelectenerg-421	174	16	of	of	ADP
fuelectenerg-421	174	17	the	the	DET
fuelectenerg-421	174	18	ri	ri	PROPN
fuelectenerg-421	174	19	design	design	NOUN
fuelectenerg-421	174	20	towards	towards	ADP
fuelectenerg-421	174	21	further	further	ADJ
fuelectenerg-421	174	22	improvements	improvement	NOUN
fuelectenerg-421	174	23	is	be	AUX
fuelectenerg-421	174	24	expected	expect	VERB
fuelectenerg-421	174	25	.	.	PUNCT
fuelectenerg-421	175	1	acknowledgement	acknowledgement	NOUN
fuelectenerg-421	175	2	.	.	PUNCT
fuelectenerg-421	176	1	this	this	DET
fuelectenerg-421	176	2	work	work	NOUN
fuelectenerg-421	176	3	was	be	AUX
fuelectenerg-421	176	4	supported	support	VERB
fuelectenerg-421	176	5	in	in	ADP
fuelectenerg-421	176	6	part	part	NOUN
fuelectenerg-421	176	7	by	by	ADP
fuelectenerg-421	176	8	the	the	DET
fuelectenerg-421	176	9	ec	ec	PROPN
fuelectenerg-421	176	10	under	under	ADP
fuelectenerg-421	176	11	fp7	fp7	PROPN
fuelectenerg-421	176	12	ict	ict	PROPN
fuelectenerg-421	176	13	project	project	PROPN
fuelectenerg-421	176	14	smac	smac	PROPN
fuelectenerg-421	176	15	(	(	PUNCT
fuelectenerg-421	176	16	288827	288827	NUM
fuelectenerg-421	176	17	)	)	PUNCT
fuelectenerg-421	176	18	,	,	PUNCT
fuelectenerg-421	176	19	eniac	eniac	NOUN
fuelectenerg-421	176	20	ju	ju	PROPN
fuelectenerg-421	176	21	under	under	ADP
fuelectenerg-421	176	22	project	project	NOUN
fuelectenerg-421	176	23	e2sg	e2sg	NOUN
fuelectenerg-421	176	24	(	(	PUNCT
fuelectenerg-421	176	25	296131	296131	NUM
fuelectenerg-421	176	26	)	)	PUNCT
fuelectenerg-421	176	27	,	,	PUNCT
fuelectenerg-421	176	28	and	and	CCONJ
fuelectenerg-421	176	29	by	by	ADP
fuelectenerg-421	176	30	the	the	DET
fuelectenerg-421	176	31	slovak	slovak	PROPN
fuelectenerg-421	176	32	republic	republic	NOUN
fuelectenerg-421	176	33	under	under	ADP
fuelectenerg-421	176	34	grant	grant	PROPN
fuelectenerg-421	176	35	vega	vega	PROPN
fuelectenerg-421	176	36	1/0823/13	1/0823/13	NUM
fuelectenerg-421	176	37	.	.	PUNCT
fuelectenerg-421	177	1	references	reference	NOUN
fuelectenerg-421	177	2	[	[	X
fuelectenerg-421	177	3	1	1	NUM
fuelectenerg-421	177	4	]	]	PUNCT
fuelectenerg-421	177	5	g.	g.	PROPN
fuelectenerg-421	177	6	w.	w.	PROPN
fuelectenerg-421	177	7	elko	elko	PROPN
fuelectenerg-421	177	8	,	,	PUNCT
fuelectenerg-421	177	9	f.	f.	PROPN
fuelectenerg-421	177	10	pardo	pardo	PROPN
fuelectenerg-421	177	11	,	,	PUNCT
fuelectenerg-421	177	12	d.	d.	PROPN
fuelectenerg-421	177	13	lpez	lpez	PROPN
fuelectenerg-421	177	14	,	,	PUNCT
fuelectenerg-421	177	15	d.	d.	PROPN
fuelectenerg-421	177	16	bishop	bishop	PROPN
fuelectenerg-421	177	17	,	,	PUNCT
fuelectenerg-421	177	18	and	and	CCONJ
fuelectenerg-421	177	19	p.	p.	NOUN
fuelectenerg-421	177	20	gammel	gammel	NOUN
fuelectenerg-421	177	21	,	,	PUNCT
fuelectenerg-421	177	22	"	"	PUNCT
fuelectenerg-421	177	23	capacitive	capacitive	ADJ
fuelectenerg-421	177	24	mems	mem	NOUN
fuelectenerg-421	177	25	microphones	microphone	NOUN
fuelectenerg-421	177	26	"	"	PUNCT
fuelectenerg-421	177	27	,	,	PUNCT
fuelectenerg-421	177	28	bell	bell	PROPN
fuelectenerg-421	177	29	labs	labs	PROPN
fuelectenerg-421	177	30	technical	technical	PROPN
fuelectenerg-421	177	31	journal	journal	PROPN
fuelectenerg-421	177	32	,	,	PUNCT
fuelectenerg-421	177	33	vol	vol	NOUN
fuelectenerg-421	177	34	.	.	PROPN
fuelectenerg-421	178	1	10	10	NUM
fuelectenerg-421	178	2	,	,	PUNCT
fuelectenerg-421	178	3	no	no	INTJ
fuelectenerg-421	178	4	.	.	NOUN
fuelectenerg-421	178	5	3	3	NUM
fuelectenerg-421	178	6	,	,	PUNCT
fuelectenerg-421	178	7	pp	pp	ADJ
fuelectenerg-421	178	8	.	.	PUNCT
fuelectenerg-421	179	1	187–198	187–198	NUM
fuelectenerg-421	179	2	,	,	PUNCT
fuelectenerg-421	179	3	2005	2005	NUM
fuelectenerg-421	179	4	.	.	PUNCT
fuelectenerg-421	180	1	[	[	X
fuelectenerg-421	180	2	2	2	X
fuelectenerg-421	180	3	]	]	PUNCT
fuelectenerg-421	180	4	s.	s.	PROPN
fuelectenerg-421	180	5	a.	a.	PROPN
fuelectenerg-421	180	6	jawed	jawed	PROPN
fuelectenerg-421	180	7	,	,	PUNCT
fuelectenerg-421	180	8	d.	d.	PROPN
fuelectenerg-421	180	9	cattin	cattin	PROPN
fuelectenerg-421	180	10	,	,	PUNCT
fuelectenerg-421	180	11	m.	m.	NOUN
fuelectenerg-421	180	12	gottardi	gottardi	NOUN
fuelectenerg-421	180	13	,	,	PUNCT
fuelectenerg-421	180	14	n.	n.	PROPN
fuelectenerg-421	180	15	massari	massari	PROPN
fuelectenerg-421	180	16	,	,	PUNCT
fuelectenerg-421	180	17	r.	r.	PROPN
fuelectenerg-421	180	18	oboe	oboe	PROPN
fuelectenerg-421	180	19	,	,	PUNCT
fuelectenerg-421	180	20	and	and	CCONJ
fuelectenerg-421	180	21	a.	a.	NOUN
fuelectenerg-421	180	22	baschirotto	baschirotto	PROPN
fuelectenerg-421	180	23	,	,	PUNCT
fuelectenerg-421	180	24	"	"	PUNCT
fuelectenerg-421	180	25	a	a	DET
fuelectenerg-421	180	26	low	low	ADJ
fuelectenerg-421	180	27	-	-	PUNCT
fuelectenerg-421	180	28	power	power	NOUN
fuelectenerg-421	180	29	interface	interface	NOUN
fuelectenerg-421	180	30	for	for	ADP
fuelectenerg-421	180	31	the	the	DET
fuelectenerg-421	180	32	readout	readout	NOUN
fuelectenerg-421	180	33	and	and	CCONJ
fuelectenerg-421	180	34	motion	motion	NOUN
fuelectenerg-421	180	35	-	-	PUNCT
fuelectenerg-421	180	36	control	control	NOUN
fuelectenerg-421	180	37	of	of	ADP
fuelectenerg-421	180	38	a	a	DET
fuelectenerg-421	180	39	mems	mem	NOUN
fuelectenerg-421	180	40	capacitive	capacitive	ADJ
fuelectenerg-421	180	41	sensor	sensor	NOUN
fuelectenerg-421	180	42	"	"	PUNCT
fuelectenerg-421	180	43	,	,	PUNCT
fuelectenerg-421	180	44	in	in	ADP
fuelectenerg-421	180	45	10th	10th	ADJ
fuelectenerg-421	180	46	ieee	ieee	NOUN
fuelectenerg-421	180	47	international	international	ADJ
fuelectenerg-421	180	48	workshop	workshop	NOUN
fuelectenerg-421	180	49	on	on	ADP
fuelectenerg-421	180	50	advanced	advanced	ADJ
fuelectenerg-421	180	51	motion	motion	NOUN
fuelectenerg-421	180	52	control	control	NOUN
fuelectenerg-421	180	53	,	,	PUNCT
fuelectenerg-421	180	54	amc	amc	PROPN
fuelectenerg-421	180	55	2008	2008	NUM
fuelectenerg-421	180	56	,	,	PUNCT
fuelectenerg-421	180	57	pp	pp	ADP
fuelectenerg-421	180	58	.	.	PUNCT
fuelectenerg-421	181	1	122–125	122–125	NUM
fuelectenerg-421	181	2	.	.	PUNCT
fuelectenerg-421	182	1	[	[	X
fuelectenerg-421	182	2	3	3	NUM
fuelectenerg-421	182	3	]	]	X
fuelectenerg-421	182	4	c.-t	c.-t	NOUN
fuelectenerg-421	182	5	.	.	PUNCT
fuelectenerg-421	183	1	chiang	chiang	PROPN
fuelectenerg-421	183	2	,	,	PUNCT
fuelectenerg-421	183	3	w.-c	w.-c	PROPN
fuelectenerg-421	183	4	.	.	PUNCT
fuelectenerg-421	184	1	chou	chou	NOUN
fuelectenerg-421	184	2	,	,	PUNCT
fuelectenerg-421	184	3	j.-c	j.-c	PROPN
fuelectenerg-421	184	4	.	.	PUNCT
fuelectenerg-421	185	1	tsai	tsai	PROPN
fuelectenerg-421	185	2	,	,	PUNCT
fuelectenerg-421	185	3	and	and	CCONJ
fuelectenerg-421	185	4	h.-l	h.-l	PROPN
fuelectenerg-421	185	5	.	.	PUNCT
fuelectenerg-421	186	1	lee	lee	PROPN
fuelectenerg-421	186	2	,	,	PUNCT
fuelectenerg-421	186	3	"	"	PUNCT
fuelectenerg-421	186	4	acmos	acmos	X
fuelectenerg-421	186	5	readout	readout	NOUN
fuelectenerg-421	186	6	circuit	circuit	NOUN
fuelectenerg-421	186	7	with	with	ADP
fuelectenerg-421	186	8	frequency	frequency	NOUN
fuelectenerg-421	186	9	optimization	optimization	NOUN
fuelectenerg-421	186	10	for	for	ADP
fuelectenerg-421	186	11	microphone	microphone	NOUN
fuelectenerg-421	186	12	sensor	sensor	NOUN
fuelectenerg-421	186	13	arrays	array	VERB
fuelectenerg-421	186	14	"	"	PUNCT
fuelectenerg-421	186	15	,	,	PUNCT
fuelectenerg-421	186	16	in	in	ADP
fuelectenerg-421	186	17	proceedings	proceeding	NOUN
fuelectenerg-421	186	18	of	of	ADP
fuelectenerg-421	186	19	the	the	DET
fuelectenerg-421	186	20	international	international	ADJ
fuelectenerg-421	186	21	symposium	symposium	NOUN
fuelectenerg-421	186	22	on	on	ADP
fuelectenerg-421	186	23	computer	computer	NOUN
fuelectenerg-421	186	24	communication	communication	NOUN
fuelectenerg-421	186	25	control	control	NOUN
fuelectenerg-421	186	26	and	and	CCONJ
fuelectenerg-421	186	27	automation	automation	NOUN
fuelectenerg-421	186	28	,	,	PUNCT
fuelectenerg-421	186	29	3ca	3ca	NOUN
fuelectenerg-421	186	30	2010	2010	NUM
fuelectenerg-421	186	31	,	,	PUNCT
fuelectenerg-421	186	32	vol	vol	NOUN
fuelectenerg-421	186	33	.	.	PROPN
fuelectenerg-421	186	34	2	2	NUM
fuelectenerg-421	186	35	,	,	PUNCT
fuelectenerg-421	186	36	pp	pp	ADJ
fuelectenerg-421	186	37	.	.	PUNCT
fuelectenerg-421	187	1	249–252	249–252	NUM
fuelectenerg-421	187	2	.	.	PUNCT
fuelectenerg-421	188	1	[	[	X
fuelectenerg-421	188	2	4	4	NUM
fuelectenerg-421	188	3	]	]	X
fuelectenerg-421	188	4	j.-t	j.-t	NOUN
fuelectenerg-421	188	5	.	.	PUNCT
fuelectenerg-421	189	1	huang	huang	PROPN
fuelectenerg-421	189	2	,	,	PUNCT
fuelectenerg-421	189	3	k.-s	k.-s	PROPN
fuelectenerg-421	189	4	.	.	PUNCT
fuelectenerg-421	190	1	chen	chen	PROPN
fuelectenerg-421	190	2	,	,	PUNCT
fuelectenerg-421	190	3	and	and	CCONJ
fuelectenerg-421	190	4	c.-c	c.-c	PROPN
fuelectenerg-421	190	5	.	.	PUNCT
fuelectenerg-421	191	1	chien	chien	PROPN
fuelectenerg-421	191	2	,	,	PUNCT
fuelectenerg-421	191	3	"	"	PUNCT
fuelectenerg-421	191	4	a	a	DET
fuelectenerg-421	191	5	differential	differential	ADJ
fuelectenerg-421	191	6	capacitive	capacitive	ADJ
fuelectenerg-421	191	7	sensing	sense	VERB
fuelectenerg-421	191	8	circuit	circuit	NOUN
fuelectenerg-421	191	9	for	for	ADP
fuelectenerg-421	191	10	micro	micro	NOUN
fuelectenerg-421	191	11	-	-	VERB
fuelectenerg-421	191	12	machined	machine	VERB
fuelectenerg-421	191	13	omnidirectional	omnidirectional	ADJ
fuelectenerg-421	191	14	microphone	microphone	NOUN
fuelectenerg-421	191	15	"	"	PUNCT
fuelectenerg-421	191	16	,	,	PUNCT
fuelectenerg-421	191	17	in	in	ADP
fuelectenerg-421	191	18	proceedings	proceeding	NOUN
fuelectenerg-421	191	19	of	of	ADP
fuelectenerg-421	191	20	the	the	DET
fuelectenerg-421	191	21	ieee	ieee	NOUN
fuelectenerg-421	191	22	international	international	PROPN
fuelectenerg-421	191	23	conference	conference	NOUN
fuelectenerg-421	191	24	on	on	ADP
fuelectenerg-421	191	25	nano	nano	NOUN
fuelectenerg-421	191	26	/	/	SYM
fuelectenerg-421	191	27	micro	micro	ADJ
fuelectenerg-421	191	28	engineered	engineer	VERB
fuelectenerg-421	191	29	and	and	CCONJ
fuelectenerg-421	191	30	molecular	molecular	ADJ
fuelectenerg-421	191	31	systems	system	NOUN
fuelectenerg-421	191	32	,	,	PUNCT
fuelectenerg-421	191	33	nems	nem	NOUN
fuelectenerg-421	191	34	2011	2011	NUM
fuelectenerg-421	191	35	,	,	PUNCT
fuelectenerg-421	191	36	pp	pp	ADV
fuelectenerg-421	191	37	.	.	PUNCT
fuelectenerg-421	192	1	948–951	948–951	NUM
fuelectenerg-421	192	2	.	.	PUNCT
fuelectenerg-421	193	1	[	[	X
fuelectenerg-421	193	2	5	5	X
fuelectenerg-421	193	3	]	]	PUNCT
fuelectenerg-421	193	4	j.	j.	PROPN
fuelectenerg-421	193	5	van	van	PROPN
fuelectenerg-421	193	6	den	den	PROPN
fuelectenerg-421	193	7	boom	boom	NOUN
fuelectenerg-421	193	8	,	,	PUNCT
fuelectenerg-421	193	9	"	"	PUNCT
fuelectenerg-421	193	10	a	a	DET
fuelectenerg-421	193	11	50_w	50_w	NUM
fuelectenerg-421	193	12	biasing	bias	VERB
fuelectenerg-421	193	13	feedback	feedback	NOUN
fuelectenerg-421	193	14	loop	loop	NOUN
fuelectenerg-421	193	15	with	with	ADP
fuelectenerg-421	193	16	6mssettling	6mssettling	NUM
fuelectenerg-421	193	17	time	time	NOUN
fuelectenerg-421	193	18	for	for	ADP
fuelectenerg-421	193	19	a	a	DET
fuelectenerg-421	193	20	mems	mem	NOUN
fuelectenerg-421	193	21	microphone	microphone	NOUN
fuelectenerg-421	193	22	with	with	ADP
fuelectenerg-421	193	23	digital	digital	ADJ
fuelectenerg-421	193	24	output	output	NOUN
fuelectenerg-421	193	25	"	"	PUNCT
fuelectenerg-421	193	26	,	,	PUNCT
fuelectenerg-421	193	27	in	in	ADP
fuelectenerg-421	193	28	digest	digest	NOUN
fuelectenerg-421	193	29	of	of	ADP
fuelectenerg-421	193	30	technical	technical	ADJ
fuelectenerg-421	193	31	papers	paper	NOUN
fuelectenerg-421	193	32	the	the	DET
fuelectenerg-421	193	33	ieee	ieee	PROPN
fuelectenerg-421	193	34	international	international	ADJ
fuelectenerg-421	193	35	solid	solid	ADJ
fuelectenerg-421	193	36	-	-	PUNCT
fuelectenerg-421	193	37	state	state	NOUN
fuelectenerg-421	193	38	circuits	circuit	NOUN
fuelectenerg-421	193	39	conference	conference	NOUN
fuelectenerg-421	193	40	,	,	PUNCT
fuelectenerg-421	193	41	isscc	isscc	ADJ
fuelectenerg-421	193	42	2012	2012	NUM
fuelectenerg-421	193	43	,	,	PUNCT
fuelectenerg-421	193	44	2012	2012	NUM
fuelectenerg-421	193	45	,	,	PUNCT
fuelectenerg-421	193	46	pp	pp	ADP
fuelectenerg-421	193	47	.	.	PUNCT
fuelectenerg-421	194	1	200–202	200–202	NUM
fuelectenerg-421	194	2	.	.	PUNCT
fuelectenerg-421	195	1	[	[	X
fuelectenerg-421	195	2	6	6	NUM
fuelectenerg-421	195	3	]	]	X
fuelectenerg-421	195	4	brüel	brüel	NOUN
fuelectenerg-421	195	5	and	and	CCONJ
fuelectenerg-421	195	6	kjaer	kjaer	NOUN
fuelectenerg-421	195	7	,	,	PUNCT
fuelectenerg-421	195	8	"	"	PUNCT
fuelectenerg-421	195	9	microphone	microphone	NOUN
fuelectenerg-421	195	10	handbook	handbook	NOUN
fuelectenerg-421	195	11	"	"	PUNCT
fuelectenerg-421	195	12	,	,	PUNCT
fuelectenerg-421	195	13	vol	vol	NOUN
fuelectenerg-421	195	14	.	.	NOUN
fuelectenerg-421	195	15	1	1	NUM
fuelectenerg-421	195	16	theory	theory	NOUN
fuelectenerg-421	195	17	.	.	PUNCT
fuelectenerg-421	196	1	nearum	nearum	ADV
fuelectenerg-421	196	2	,	,	PUNCT
fuelectenerg-421	196	3	denmark	denmark	PROPN
fuelectenerg-421	196	4	:	:	PUNCT
fuelectenerg-421	196	5	brüel	brüel	PROPN
fuelectenerg-421	196	6	and	and	CCONJ
fuelectenerg-421	196	7	kjaer	kjaer	NOUN
fuelectenerg-421	196	8	,	,	PUNCT
fuelectenerg-421	196	9	1996	1996	NUM
fuelectenerg-421	196	10	.	.	PUNCT
fuelectenerg-421	197	1	[	[	X
fuelectenerg-421	197	2	7	7	X
fuelectenerg-421	197	3	]	]	X
fuelectenerg-421	197	4	tao	tao	PROPN
fuelectenerg-421	197	5	yin	yin	PROPN
fuelectenerg-421	197	6	;	;	PUNCT
fuelectenerg-421	197	7	huanming	huanme	VERB
fuelectenerg-421	197	8	wu	wu	PROPN
fuelectenerg-421	197	9	;	;	PUNCT
fuelectenerg-421	197	10	qisong	qisong	PROPN
fuelectenerg-421	197	11	wu	wu	PROPN
fuelectenerg-421	197	12	;	;	PUNCT
fuelectenerg-421	197	13	haigang	haigang	PROPN
fuelectenerg-421	197	14	yang	yang	PROPN
fuelectenerg-421	197	15	;	;	PUNCT
fuelectenerg-421	197	16	jiao	jiao	PROPN
fuelectenerg-421	197	17	,	,	PUNCT
fuelectenerg-421	197	18	j.	j.	PROPN
fuelectenerg-421	197	19	,	,	PUNCT
fuelectenerg-421	197	20	"	"	PUNCT
fuelectenerg-421	197	21	a	a	DET
fuelectenerg-421	197	22	tia	tia	PROPN
fuelectenerg-421	197	23	-	-	PUNCT
fuelectenerg-421	197	24	based	base	VERB
fuelectenerg-421	197	25	readout	readout	NOUN
fuelectenerg-421	197	26	circuit	circuit	NOUN
fuelectenerg-421	197	27	with	with	ADP
fuelectenerg-421	197	28	temperature	temperature	NOUN
fuelectenerg-421	197	29	compensation	compensation	NOUN
fuelectenerg-421	197	30	for	for	ADP
fuelectenerg-421	197	31	mems	mem	NOUN
fuelectenerg-421	197	32	capacitive	capacitive	ADJ
fuelectenerg-421	197	33	gyroscope	gyroscope	NOUN
fuelectenerg-421	197	34	"	"	PUNCT
fuelectenerg-421	197	35	,	,	PUNCT
fuelectenerg-421	197	36	in	in	ADP
fuelectenerg-421	197	37	proceedings	proceeding	NOUN
fuelectenerg-421	197	38	on	on	ADP
fuelectenerg-421	197	39	ieee	ieee	PROPN
fuelectenerg-421	197	40	international	international	ADJ
fuelectenerg-421	197	41	conference	conference	NOUN
fuelectenerg-421	197	42	on	on	ADP
fuelectenerg-421	197	43	nano	nano	NOUN
fuelectenerg-421	197	44	/	/	SYM
fuelectenerg-421	197	45	micro	micro	ADJ
fuelectenerg-421	197	46	engineered	engineer	VERB
fuelectenerg-421	197	47	and	and	CCONJ
fuelectenerg-421	197	48	molecular	molecular	ADJ
fuelectenerg-421	197	49	systems	system	NOUN
fuelectenerg-421	197	50	,	,	PUNCT
fuelectenerg-421	197	51	nems	nem	NOUN
fuelectenerg-421	197	52	2011	2011	NUM
fuelectenerg-421	197	53	,	,	PUNCT
fuelectenerg-421	197	54	pp	pp	ADJ
fuelectenerg-421	197	55	.	.	PUNCT
fuelectenerg-421	198	1	401–405	401–405	NUM
fuelectenerg-421	198	2	,	,	PUNCT
fuelectenerg-421	198	3	20	20	NUM
fuelectenerg-421	198	4	-	-	SYM
fuelectenerg-421	198	5	23	23	NUM
fuelectenerg-421	198	6	feb	feb	NOUN
fuelectenerg-421	198	7	.	.	PROPN
fuelectenerg-421	198	8	2011	2011	NUM
fuelectenerg-421	198	9	.	.	PUNCT
fuelectenerg-421	199	1	[	[	X
fuelectenerg-421	199	2	8	8	NUM
fuelectenerg-421	199	3	]	]	PUNCT
fuelectenerg-421	199	4	jawed	jawed	ADV
fuelectenerg-421	199	5	,	,	PUNCT
fuelectenerg-421	199	6	s.	s.	PROPN
fuelectenerg-421	199	7	a	a	X
fuelectenerg-421	199	8	;	;	PUNCT
fuelectenerg-421	199	9	gottardi	gottardi	NOUN
fuelectenerg-421	199	10	,	,	PUNCT
fuelectenerg-421	199	11	m.	m.	NOUN
fuelectenerg-421	199	12	;	;	PUNCT
fuelectenerg-421	199	13	baschirotto	baschirotto	PROPN
fuelectenerg-421	199	14	,	,	PUNCT
fuelectenerg-421	199	15	a	a	PRON
fuelectenerg-421	199	16	,	,	PUNCT
fuelectenerg-421	199	17	"	"	PUNCT
fuelectenerg-421	199	18	a	a	DET
fuelectenerg-421	199	19	switched	switch	VERB
fuelectenerg-421	199	20	capacitor	capacitor	NOUN
fuelectenerg-421	199	21	interface	interface	NOUN
fuelectenerg-421	199	22	for	for	ADP
fuelectenerg-421	199	23	a	a	DET
fuelectenerg-421	199	24	capacitive	capacitive	ADJ
fuelectenerg-421	199	25	microphone	microphone	NOUN
fuelectenerg-421	199	26	,	,	PUNCT
fuelectenerg-421	199	27	"	"	PUNCT
fuelectenerg-421	199	28	research	research	NOUN
fuelectenerg-421	199	29	in	in	ADP
fuelectenerg-421	199	30	microelectronics	microelectronic	NOUN
fuelectenerg-421	199	31	and	and	CCONJ
fuelectenerg-421	199	32	electronics	electronic	NOUN
fuelectenerg-421	199	33	2006	2006	NUM
fuelectenerg-421	199	34	,	,	PUNCT
fuelectenerg-421	199	35	ph	ph	PROPN
fuelectenerg-421	199	36	.	.	PROPN
fuelectenerg-421	199	37	d.	d.	PROPN
fuelectenerg-421	199	38	,	,	PUNCT
fuelectenerg-421	199	39	pp	pp	PROPN
fuelectenerg-421	199	40	.	.	PUNCT
fuelectenerg-421	200	1	385	385	NUM
fuelectenerg-421	200	2	-	-	SYM
fuelectenerg-421	200	3	388	388	NUM
fuelectenerg-421	200	4	.	.	PUNCT
fuelectenerg-421	201	1	[	[	X
fuelectenerg-421	201	2	9	9	NUM
fuelectenerg-421	201	3	]	]	X
fuelectenerg-421	201	4	sheng	sheng	PROPN
fuelectenerg-421	201	5	-	-	PUNCT
fuelectenerg-421	201	6	yu	yu	PROPN
fuelectenerg-421	201	7	peng	peng	PROPN
fuelectenerg-421	201	8	;	;	PUNCT
fuelectenerg-421	201	9	qureshi	qureshi	PROPN
fuelectenerg-421	201	10	,	,	PUNCT
fuelectenerg-421	201	11	m.s	m.s	PROPN
fuelectenerg-421	201	12	.	.	PROPN
fuelectenerg-421	201	13	;	;	PUNCT
fuelectenerg-421	201	14	hasler	hasler	NOUN
fuelectenerg-421	201	15	,	,	PUNCT
fuelectenerg-421	201	16	p.e	p.e	PROPN
fuelectenerg-421	201	17	.	.	PROPN
fuelectenerg-421	201	18	;	;	PUNCT
fuelectenerg-421	201	19	basu	basu	PROPN
fuelectenerg-421	201	20	,	,	PUNCT
fuelectenerg-421	201	21	a	a	X
fuelectenerg-421	201	22	;	;	PUNCT
fuelectenerg-421	201	23	degertekin	degertekin	NOUN
fuelectenerg-421	201	24	,	,	PUNCT
fuelectenerg-421	201	25	f.l	f.l	PROPN
fuelectenerg-421	201	26	.	.	PROPN
fuelectenerg-421	201	27	,	,	PUNCT
fuelectenerg-421	201	28	"	"	PUNCT
fuelectenerg-421	201	29	a	a	DET
fuelectenerg-421	201	30	charge	charge	NOUN
fuelectenerg-421	201	31	-	-	PUNCT
fuelectenerg-421	201	32	based	base	VERB
fuelectenerg-421	201	33	low	low	ADJ
fuelectenerg-421	201	34	-	-	PUNCT
fuelectenerg-421	201	35	power	power	NOUN
fuelectenerg-421	201	36	high	high	ADJ
fuelectenerg-421	201	37	-	-	PUNCT
fuelectenerg-421	201	38	snr	snr	NOUN
fuelectenerg-421	201	39	capacitive	capacitive	ADJ
fuelectenerg-421	201	40	sensing	sense	VERB
fuelectenerg-421	201	41	interface	interface	NOUN
fuelectenerg-421	201	42	circuit	circuit	NOUN
fuelectenerg-421	201	43	,	,	PUNCT
fuelectenerg-421	201	44	"	"	PUNCT
fuelectenerg-421	201	45	ieee	ieee	NOUN
fuelectenerg-421	201	46	transactions	transaction	NOUN
fuelectenerg-421	201	47	on	on	ADP
fuelectenerg-421	201	48	circuits	circuit	NOUN
fuelectenerg-421	201	49	and	and	CCONJ
fuelectenerg-421	201	50	systems	system	NOUN
fuelectenerg-421	201	51	i	i	PRON
fuelectenerg-421	201	52	:	:	PUNCT
fuelectenerg-421	201	53	regular	regular	ADJ
fuelectenerg-421	201	54	papers	paper	NOUN
fuelectenerg-421	201	55	,	,	PUNCT
fuelectenerg-421	201	56	vol.55	vol.55	PROPN
fuelectenerg-421	201	57	,	,	PUNCT
fuelectenerg-421	201	58	no.7	no.7	PROPN
fuelectenerg-421	201	59	,	,	PUNCT
fuelectenerg-421	201	60	pp.1863–1872	pp.1863–1872	PROPN
fuelectenerg-421	201	61	,	,	PUNCT
fuelectenerg-421	201	62	aug	aug	PROPN
fuelectenerg-421	201	63	.	.	PROPN
fuelectenerg-421	201	64	2008	2008	NUM
fuelectenerg-421	201	65	.	.	PUNCT
fuelectenerg-421	202	1	[	[	X
fuelectenerg-421	202	2	10	10	NUM
fuelectenerg-421	202	3	]	]	X
fuelectenerg-421	202	4	w.	w.	PROPN
fuelectenerg-421	202	5	jiangfeng	jiangfeng	PROPN
fuelectenerg-421	202	6	,	,	PUNCT
fuelectenerg-421	202	7	g.k	g.k	PROPN
fuelectenerg-421	202	8	.	.	PROPN
fuelectenerg-421	202	9	fedder	fedder	PROPN
fuelectenerg-421	202	10	,	,	PUNCT
fuelectenerg-421	202	11	l.r	l.r	PROPN
fuelectenerg-421	202	12	.	.	PUNCT
fuelectenerg-421	202	13	carley	carley	PROPN
fuelectenerg-421	202	14	,	,	PUNCT
fuelectenerg-421	202	15	"	"	PUNCT
fuelectenerg-421	202	16	a	a	DET
fuelectenerg-421	202	17	low	low	ADJ
fuelectenerg-421	202	18	-	-	PUNCT
fuelectenerg-421	202	19	noise	noise	NOUN
fuelectenerg-421	202	20	low	low	ADJ
fuelectenerg-421	202	21	-	-	PUNCT
fuelectenerg-421	202	22	offset	offset	NOUN
fuelectenerg-421	202	23	capacitive	capacitive	ADJ
fuelectenerg-421	202	24	sensing	sense	VERB
fuelectenerg-421	202	25	amplifier	amplifier	NOUN
fuelectenerg-421	202	26	for	for	ADP
fuelectenerg-421	202	27	a	a	DET
fuelectenerg-421	202	28	50μg/√hz	50μg/√hz	NUM
fuelectenerg-421	202	29	monolithic	monolithic	ADJ
fuelectenerg-421	202	30	cmos	cmos	NOUN
fuelectenerg-421	202	31	mems	mem	NOUN
fuelectenerg-421	202	32	accelerometer	accelerometer	NOUN
fuelectenerg-421	202	33	,	,	PUNCT
fuelectenerg-421	202	34	"	"	PUNCT
fuelectenerg-421	202	35	ieee	ieee	NOUN
fuelectenerg-421	202	36	journal	journal	NOUN
fuelectenerg-421	202	37	of	of	ADP
fuelectenerg-421	202	38	solid	solid	ADJ
fuelectenerg-421	202	39	-	-	PUNCT
fuelectenerg-421	202	40	state	state	NOUN
fuelectenerg-421	202	41	circuits	circuit	NOUN
fuelectenerg-421	202	42	,	,	PUNCT
fuelectenerg-421	202	43	vol.39	vol.39	NOUN
fuelectenerg-421	202	44	,	,	PUNCT
fuelectenerg-421	202	45	no.5	no.5	PROPN
fuelectenerg-421	202	46	,	,	PUNCT
fuelectenerg-421	202	47	pp	pp	X
fuelectenerg-421	202	48	.	.	PUNCT
fuelectenerg-421	203	1	722–730	722–730	NUM
fuelectenerg-421	203	2	,	,	PUNCT
fuelectenerg-421	203	3	may	may	PROPN
fuelectenerg-421	203	4	2004	2004	NUM
fuelectenerg-421	203	5	.	.	PUNCT
fuelectenerg-421	204	1	[	[	X
fuelectenerg-421	204	2	11	11	NUM
fuelectenerg-421	204	3	]	]	PUNCT
fuelectenerg-421	204	4	pastre	pastre	NOUN
fuelectenerg-421	204	5	,	,	PUNCT
fuelectenerg-421	204	6	m.	m.	NOUN
fuelectenerg-421	204	7	,	,	PUNCT
fuelectenerg-421	204	8	kayal	kayal	PROPN
fuelectenerg-421	204	9	,	,	PUNCT
fuelectenerg-421	204	10	m.	m.	NOUN
fuelectenerg-421	204	11	methodology	methodology	NOUN
fuelectenerg-421	204	12	for	for	ADP
fuelectenerg-421	204	13	the	the	DET
fuelectenerg-421	204	14	digital	digital	ADJ
fuelectenerg-421	204	15	calibration	calibration	NOUN
fuelectenerg-421	204	16	of	of	ADP
fuelectenerg-421	204	17	analog	analog	NOUN
fuelectenerg-421	204	18	circuits	circuit	NOUN
fuelectenerg-421	204	19	and	and	CCONJ
fuelectenerg-421	204	20	systems	system	NOUN
fuelectenerg-421	204	21	:	:	PUNCT
fuelectenerg-421	204	22	with	with	ADP
fuelectenerg-421	204	23	case	case	NOUN
fuelectenerg-421	204	24	studies	study	NOUN
fuelectenerg-421	204	25	,	,	PUNCT
fuelectenerg-421	204	26	1st	1st	ADJ
fuelectenerg-421	204	27	ed	ed	NOUN
fuelectenerg-421	204	28	.	.	PUNCT
fuelectenerg-421	205	1	springer	springer	NOUN
fuelectenerg-421	205	2	publishing	publishing	NOUN
fuelectenerg-421	205	3	company	company	NOUN
fuelectenerg-421	205	4	,	,	PUNCT
fuelectenerg-421	205	5	incorporated	incorporate	VERB
fuelectenerg-421	205	6	,	,	PUNCT
fuelectenerg-421	205	7	2009	2009	NUM
fuelectenerg-421	205	8	.	.	PUNCT
fuelectenerg-421	206	1	[	[	X
fuelectenerg-421	206	2	12	12	NUM
fuelectenerg-421	206	3	]	]	PUNCT
fuelectenerg-421	206	4	a.	a.	NOUN
fuelectenerg-421	206	5	van	van	PROPN
fuelectenerg-421	206	6	roermund	roermund	PROPN
fuelectenerg-421	206	7	,	,	PUNCT
fuelectenerg-421	206	8	a.	a.	NOUN
fuelectenerg-421	206	9	baschirotto	baschirotto	PROPN
fuelectenerg-421	206	10	,	,	PUNCT
fuelectenerg-421	206	11	and	and	CCONJ
fuelectenerg-421	206	12	m.	m.	NOUN
fuelectenerg-421	206	13	steyaert	steyaert	NOUN
fuelectenerg-421	206	14	,	,	PUNCT
fuelectenerg-421	206	15	nyquist	nyquist	NOUN
fuelectenerg-421	206	16	ad	ad	NOUN
fuelectenerg-421	206	17	converters	converter	NOUN
fuelectenerg-421	206	18	,	,	PUNCT
fuelectenerg-421	206	19	sensor	sensor	NOUN
fuelectenerg-421	206	20	interfaces	interface	NOUN
fuelectenerg-421	206	21	,	,	PUNCT
fuelectenerg-421	206	22	and	and	CCONJ
fuelectenerg-421	206	23	robustness	robustness	NOUN
fuelectenerg-421	206	24	:	:	PUNCT
fuelectenerg-421	206	25	advances	advance	NOUN
fuelectenerg-421	206	26	in	in	ADP
fuelectenerg-421	206	27	analog	analog	NOUN
fuelectenerg-421	206	28	circuit	circuit	NOUN
fuelectenerg-421	206	29	design	design	NOUN
fuelectenerg-421	206	30	,	,	PUNCT
fuelectenerg-421	206	31	2012	2012	NUM
fuelectenerg-421	206	32	,	,	PUNCT
fuelectenerg-421	206	33	ser	ser	PROPN
fuelectenerg-421	206	34	.	.	PROPN
fuelectenerg-421	206	35	springer	springer	PROPN
fuelectenerg-421	206	36	link	link	PROPN
fuelectenerg-421	206	37	:	:	PUNCT
fuelectenerg-421	206	38	bücher	bücher	PROPN
fuelectenerg-421	206	39	.	.	PUNCT
fuelectenerg-421	206	40	springer	springer	NOUN
fuelectenerg-421	206	41	,	,	PUNCT
fuelectenerg-421	206	42	2012	2012	NUM
fuelectenerg-421	206	43	.	.	PUNCT
fuelectenerg-421	207	1	[	[	X
fuelectenerg-421	207	2	13	13	NUM
fuelectenerg-421	207	3	]	]	X
fuelectenerg-421	207	4	l.	l.	PROPN
fuelectenerg-421	207	5	baxter	baxter	PROPN
fuelectenerg-421	207	6	,	,	PUNCT
fuelectenerg-421	207	7	capacitive	capacitive	ADJ
fuelectenerg-421	207	8	sensors	sensor	NOUN
fuelectenerg-421	207	9	:	:	PUNCT
fuelectenerg-421	207	10	design	design	NOUN
fuelectenerg-421	207	11	and	and	CCONJ
fuelectenerg-421	207	12	applications	application	NOUN
fuelectenerg-421	207	13	,	,	PUNCT
fuelectenerg-421	207	14	ser	ser	PROPN
fuelectenerg-421	207	15	.	.	PUNCT
fuelectenerg-421	208	1	ieee	ieee	PROPN
fuelectenerg-421	208	2	press	press	PROPN
fuelectenerg-421	208	3	series	series	NOUN
fuelectenerg-421	208	4	on	on	ADP
fuelectenerg-421	208	5	electronics	electronic	NOUN
fuelectenerg-421	208	6	technology	technology	NOUN
fuelectenerg-421	208	7	.	.	PUNCT
fuelectenerg-421	209	1	john	john	PROPN
fuelectenerg-421	209	2	wiley	wiley	PROPN
fuelectenerg-421	209	3	&	&	CCONJ
fuelectenerg-421	209	4	sons	son	NOUN
fuelectenerg-421	209	5	,	,	PUNCT
fuelectenerg-421	209	6	1996	1996	NUM
fuelectenerg-421	209	7	.	.	PUNCT
fuelectenerg-421	210	1	[	[	X
fuelectenerg-421	210	2	14	14	NUM
fuelectenerg-421	210	3	]	]	X
fuelectenerg-421	210	4	s.	s.	PROPN
fuelectenerg-421	210	5	a.	a.	PROPN
fuelectenerg-421	210	6	jawed	jawed	PROPN
fuelectenerg-421	210	7	,	,	PUNCT
fuelectenerg-421	210	8	d.	d.	PROPN
fuelectenerg-421	210	9	cattin	cattin	PROPN
fuelectenerg-421	210	10	,	,	PUNCT
fuelectenerg-421	210	11	m.	m.	NOUN
fuelectenerg-421	210	12	gottardi	gottardi	NOUN
fuelectenerg-421	210	13	,	,	PUNCT
fuelectenerg-421	210	14	n.	n.	PROPN
fuelectenerg-421	210	15	massari	massari	PROPN
fuelectenerg-421	210	16	,	,	PUNCT
fuelectenerg-421	210	17	a.	a.	NOUN
fuelectenerg-421	210	18	baschirotto	baschirotto	PROPN
fuelectenerg-421	210	19	,	,	PUNCT
fuelectenerg-421	210	20	and	and	CCONJ
fuelectenerg-421	210	21	a.	a.	NOUN
fuelectenerg-421	210	22	simoni	simoni	PROPN
fuelectenerg-421	210	23	,	,	PUNCT
fuelectenerg-421	210	24	"	"	PUNCT
fuelectenerg-421	210	25	a	a	DET
fuelectenerg-421	210	26	828μw	828μw	ADJ
fuelectenerg-421	210	27	1.8v	1.8v	NUM
fuelectenerg-421	210	28	80db	80db	ADJ
fuelectenerg-421	210	29	dynamic	dynamic	ADJ
fuelectenerg-421	210	30	-	-	PUNCT
fuelectenerg-421	210	31	range	range	NOUN
fuelectenerg-421	210	32	readout	readout	NOUN
fuelectenerg-421	210	33	interface	interface	NOUN
fuelectenerg-421	210	34	for	for	ADP
fuelectenerg-421	210	35	a	a	DET
fuelectenerg-421	210	36	mems	mem	NOUN
fuelectenerg-421	210	37	capacitive	capacitive	ADJ
fuelectenerg-421	210	38	microphone	microphone	NOUN
fuelectenerg-421	210	39	"	"	PUNCT
fuelectenerg-421	210	40	,	,	PUNCT
fuelectenerg-421	210	41	in	in	ADP
fuelectenerg-421	210	42	proceedings	proceeding	NOUN
fuelectenerg-421	210	43	on	on	ADP
fuelectenerg-421	210	44	34th	34th	ADJ
fuelectenerg-421	210	45	european	european	ADJ
fuelectenerg-421	210	46	solid	solid	ADJ
fuelectenerg-421	210	47	-	-	PUNCT
fuelectenerg-421	210	48	state	state	NOUN
fuelectenerg-421	210	49	circuits	circuit	NOUN
fuelectenerg-421	210	50	conference	conference	NOUN
fuelectenerg-421	210	51	,	,	PUNCT
fuelectenerg-421	210	52	esscirc	esscirc	NOUN
fuelectenerg-421	210	53	2008	2008	NUM
fuelectenerg-421	210	54	,	,	PUNCT
fuelectenerg-421	210	55	sept	sept	PROPN
fuelectenerg-421	210	56	2008	2008	NUM
fuelectenerg-421	210	57	,	,	PUNCT
fuelectenerg-421	210	58	pp	pp	ADJ
fuelectenerg-421	210	59	.	.	PUNCT
fuelectenerg-421	211	1	442–445	442–445	NUM
fuelectenerg-421	211	2	.	.	PUNCT
fuelectenerg-421	212	1	[	[	X
fuelectenerg-421	212	2	15	15	NUM
fuelectenerg-421	212	3	]	]	X
fuelectenerg-421	212	4	i.	i.	NOUN
fuelectenerg-421	212	5	deligoz	deligoz	PROPN
fuelectenerg-421	212	6	,	,	PUNCT
fuelectenerg-421	212	7	s.	s.	PROPN
fuelectenerg-421	212	8	naqvi	naqvi	PROPN
fuelectenerg-421	212	9	,	,	PUNCT
fuelectenerg-421	212	10	t.	t.	PROPN
fuelectenerg-421	212	11	copani	copani	PROPN
fuelectenerg-421	212	12	,	,	PUNCT
fuelectenerg-421	212	13	s.	s.	PROPN
fuelectenerg-421	212	14	kiaei	kiaei	PROPN
fuelectenerg-421	212	15	,	,	PUNCT
fuelectenerg-421	212	16	b.	b.	PROPN
fuelectenerg-421	212	17	bakkaloglu	bakkaloglu	PROPN
fuelectenerg-421	212	18	,	,	PUNCT
fuelectenerg-421	212	19	s.-s	s.-	NOUN
fuelectenerg-421	212	20	.	.	PUNCT
fuelectenerg-421	213	1	je	je	PROPN
fuelectenerg-421	213	2	,	,	PUNCT
fuelectenerg-421	213	3	and	and	CCONJ
fuelectenerg-421	213	4	j.	j.	PROPN
fuelectenerg-421	213	5	chae	chae	PROPN
fuelectenerg-421	213	6	,	,	PUNCT
fuelectenerg-421	213	7	"	"	PUNCT
fuelectenerg-421	213	8	a	a	DET
fuelectenerg-421	213	9	mems	mem	NOUN
fuelectenerg-421	213	10	-	-	PUNCT
fuelectenerg-421	213	11	based	base	VERB
fuelectenerg-421	213	12	powerscalable	powerscalable	ADJ
fuelectenerg-421	213	13	hearing	hearing	NOUN
fuelectenerg-421	213	14	aid	aid	NOUN
fuelectenerg-421	213	15	analog	analog	NOUN
fuelectenerg-421	213	16	front	front	ADJ
fuelectenerg-421	213	17	end	end	NOUN
fuelectenerg-421	213	18	"	"	PUNCT
fuelectenerg-421	213	19	,	,	PUNCT
fuelectenerg-421	213	20	ieee	ieee	NOUN
fuelectenerg-421	213	21	transactions	transaction	NOUN
fuelectenerg-421	213	22	on	on	ADP
fuelectenerg-421	213	23	biomedical	biomedical	ADJ
fuelectenerg-421	213	24	circuits	circuit	NOUN
fuelectenerg-421	213	25	and	and	CCONJ
fuelectenerg-421	213	26	systems	system	NOUN
fuelectenerg-421	213	27	,	,	PUNCT
fuelectenerg-421	213	28	vol	vol	NOUN
fuelectenerg-421	213	29	.	.	PROPN
fuelectenerg-421	213	30	5	5	NUM
fuelectenerg-421	213	31	,	,	PUNCT
fuelectenerg-421	213	32	no	no	INTJ
fuelectenerg-421	213	33	.	.	NOUN
fuelectenerg-421	213	34	3	3	NUM
fuelectenerg-421	213	35	,	,	PUNCT
fuelectenerg-421	213	36	pp	pp	ADJ
fuelectenerg-421	213	37	.	.	PUNCT
fuelectenerg-421	214	1	201–213	201–213	NUM
fuelectenerg-421	214	2	,	,	PUNCT
fuelectenerg-421	214	3	june	june	PROPN
fuelectenerg-421	214	4	2011	2011	NUM
fuelectenerg-421	214	5	.	.	PUNCT
fuelectenerg-421	215	1	[	[	X
fuelectenerg-421	215	2	16	16	NUM
fuelectenerg-421	215	3	]	]	PUNCT
fuelectenerg-421	215	4	s.	s.	PROPN
fuelectenerg-421	215	5	a.	a.	PROPN
fuelectenerg-421	215	6	jawed	jawed	PROPN
fuelectenerg-421	215	7	,	,	PUNCT
fuelectenerg-421	215	8	j.	j.	PROPN
fuelectenerg-421	215	9	nielsen	nielsen	PROPN
fuelectenerg-421	215	10	,	,	PUNCT
fuelectenerg-421	215	11	m.	m.	NOUN
fuelectenerg-421	215	12	gottardi	gottardi	NOUN
fuelectenerg-421	215	13	,	,	PUNCT
fuelectenerg-421	215	14	a.	a.	NOUN
fuelectenerg-421	215	15	baschirotto	baschirotto	PROPN
fuelectenerg-421	215	16	,	,	PUNCT
fuelectenerg-421	215	17	and	and	CCONJ
fuelectenerg-421	215	18	e.	e.	PROPN
fuelectenerg-421	215	19	bruun	bruun	PROPN
fuelectenerg-421	215	20	,	,	PUNCT
fuelectenerg-421	215	21	"	"	PUNCT
fuelectenerg-421	215	22	a	a	DET
fuelectenerg-421	215	23	multifunction	multifunction	NOUN
fuelectenerg-421	215	24	low	low	ADJ
fuelectenerg-421	215	25	-	-	PUNCT
fuelectenerg-421	215	26	power	power	NOUN
fuelectenerg-421	215	27	preamplifier	preamplifier	NOUN
fuelectenerg-421	215	28	for	for	ADP
fuelectenerg-421	215	29	mems	mem	NOUN
fuelectenerg-421	215	30	capacitive	capacitive	ADJ
fuelectenerg-421	215	31	microphones	microphone	NOUN
fuelectenerg-421	215	32	"	"	PUNCT
fuelectenerg-421	215	33	,	,	PUNCT
fuelectenerg-421	215	34	in	in	ADP
fuelectenerg-421	215	35	proceedings	proceeding	NOUN
fuelectenerg-421	215	36	of	of	ADP
fuelectenerg-421	215	37	esscirc	esscirc	NOUN
fuelectenerg-421	215	38	,	,	PUNCT
fuelectenerg-421	215	39	esscirc	esscirc	NOUN
fuelectenerg-421	215	40	2009	2009	NUM
fuelectenerg-421	215	41	,	,	PUNCT
fuelectenerg-421	215	42	sept	sept	PROPN
fuelectenerg-421	215	43	2009	2009	NUM
fuelectenerg-421	215	44	,	,	PUNCT
fuelectenerg-421	215	45	pp	pp	ADV
fuelectenerg-421	215	46	.	.	PUNCT
fuelectenerg-421	216	1	292–295	292–295	NUM
fuelectenerg-421	216	2	.	.	PUNCT
fuelectenerg-421	217	1	[	[	X
fuelectenerg-421	217	2	17	17	NUM
fuelectenerg-421	217	3	]	]	X
fuelectenerg-421	217	4	c.	c.	PROPN
fuelectenerg-421	217	5	furst	furst	PROPN
fuelectenerg-421	217	6	,	,	PUNCT
fuelectenerg-421	217	7	"	"	PUNCT
fuelectenerg-421	217	8	a	a	DET
fuelectenerg-421	217	9	low	low	ADJ
fuelectenerg-421	217	10	-	-	PUNCT
fuelectenerg-421	217	11	noise	noise	NOUN
fuelectenerg-421	217	12	/	/	SYM
fuelectenerg-421	217	13	low	low	ADJ
fuelectenerg-421	217	14	-	-	PUNCT
fuelectenerg-421	217	15	power	power	NOUN
fuelectenerg-421	217	16	preamplifier	preamplifier	NOUN
fuelectenerg-421	217	17	for	for	ADP
fuelectenerg-421	217	18	capacitive	capacitive	ADJ
fuelectenerg-421	217	19	microphones	microphone	NOUN
fuelectenerg-421	217	20	"	"	PUNCT
fuelectenerg-421	217	21	,	,	PUNCT
fuelectenerg-421	217	22	in	in	ADP
fuelectenerg-421	217	23	proceedings	proceeding	NOUN
fuelectenerg-421	217	24	on	on	ADP
fuelectenerg-421	217	25	the	the	DET
fuelectenerg-421	217	26	ieee	ieee	NOUN
fuelectenerg-421	217	27	international	international	ADJ
fuelectenerg-421	217	28	symposium	symposium	NOUN
fuelectenerg-421	217	29	on	on	ADP
fuelectenerg-421	217	30	circuits	circuit	NOUN
fuelectenerg-421	217	31	and	and	CCONJ
fuelectenerg-421	217	32	systems	system	NOUN
fuelectenerg-421	217	33	connecting	connect	VERB
fuelectenerg-421	217	34	the	the	DET
fuelectenerg-421	217	35	world	world	NOUN
fuelectenerg-421	217	36	,	,	PUNCT
fuelectenerg-421	217	37	iscas	iscas	PROPN
fuelectenerg-421	217	38	1996	1996	NUM
fuelectenerg-421	217	39	,	,	PUNCT
fuelectenerg-421	217	40	vol	vol	NOUN
fuelectenerg-421	217	41	.	.	PROPN
fuelectenerg-421	217	42	1	1	NUM
fuelectenerg-421	217	43	,	,	PUNCT
fuelectenerg-421	217	44	may	may	PROPN
fuelectenerg-421	217	45	1996	1996	NUM
fuelectenerg-421	217	46	,	,	PUNCT
fuelectenerg-421	217	47	pp	pp	ADP
fuelectenerg-421	217	48	.	.	PUNCT
fuelectenerg-421	218	1	477–480	477–480	NUM
fuelectenerg-421	218	2	.	.	PUNCT
fuelectenerg-421	219	1	274	274	NUM
fuelectenerg-421	219	2	d.	d.	PROPN
fuelectenerg-421	219	3	arbet	arbet	PROPN
fuelectenerg-421	219	4	,	,	PUNCT
fuelectenerg-421	219	5	v.	v.	ADP
fuelectenerg-421	219	6	stopjaková	stopjaková	PROPN
fuelectenerg-421	219	7	,	,	PUNCT
fuelectenerg-421	219	8	m.	m.	NOUN
fuelectenerg-421	219	9	kováč	kováč	PROPN
fuelectenerg-421	219	10	,	,	PUNCT
fuelectenerg-421	219	11	l.	l.	PROPN
fuelectenerg-421	219	12	nagy	nagy	PROPN
fuelectenerg-421	219	13	,	,	PUNCT
fuelectenerg-421	219	14	g.	g.	PROPN
fuelectenerg-421	219	15	nagy	nagy	PROPN
fuelectenerg-421	220	1	[	[	X
fuelectenerg-421	220	2	18	18	NUM
fuelectenerg-421	220	3	]	]	X
fuelectenerg-421	220	4	c.	c.	PROPN
fuelectenerg-421	220	5	enz	enz	PROPN
fuelectenerg-421	220	6	,	,	PUNCT
fuelectenerg-421	220	7	e.	e.	PROPN
fuelectenerg-421	220	8	vittoz	vittoz	PROPN
fuelectenerg-421	220	9	,	,	PUNCT
fuelectenerg-421	220	10	f.	f.	PROPN
fuelectenerg-421	220	11	krummenacher	krummenacher	PROPN
fuelectenerg-421	220	12	,	,	PUNCT
fuelectenerg-421	220	13	"	"	PUNCT
fuelectenerg-421	220	14	a	a	DET
fuelectenerg-421	220	15	cmos	cmos	PROPN
fuelectenerg-421	220	16	chopper	chopper	NOUN
fuelectenerg-421	220	17	amplifier	amplifier	NOUN
fuelectenerg-421	220	18	"	"	PUNCT
fuelectenerg-421	220	19	,	,	PUNCT
fuelectenerg-421	220	20	ieee	ieee	PROPN
fuelectenerg-421	220	21	journal	journal	PROPN
fuelectenerg-421	220	22	solid	solid	ADJ
fuelectenerg-421	220	23	-	-	PUNCT
fuelectenerg-421	220	24	state	state	NOUN
fuelectenerg-421	220	25	circuits	circuit	NOUN
fuelectenerg-421	220	26	,	,	PUNCT
fuelectenerg-421	220	27	vol	vol	NOUN
fuelectenerg-421	220	28	.	.	PROPN
fuelectenerg-421	220	29	22	22	NUM
fuelectenerg-421	220	30	,	,	PUNCT
fuelectenerg-421	220	31	no	no	INTJ
fuelectenerg-421	220	32	.	.	NOUN
fuelectenerg-421	220	33	3	3	NUM
fuelectenerg-421	220	34	,	,	PUNCT
fuelectenerg-421	220	35	jun	jun	PROPN
fuelectenerg-421	220	36	1987	1987	NUM
fuelectenerg-421	220	37	,	,	PUNCT
fuelectenerg-421	220	38	p.	p.	NOUN
fuelectenerg-421	220	39	335–342	335–342	NUM
fuelectenerg-421	220	40	.	.	PUNCT
fuelectenerg-421	221	1	[	[	X
fuelectenerg-421	221	2	19	19	NUM
fuelectenerg-421	221	3	]	]	X
fuelectenerg-421	221	4	c.	c.	PROPN
fuelectenerg-421	221	5	enz	enz	PROPN
fuelectenerg-421	221	6	,	,	PUNCT
fuelectenerg-421	221	7	and	and	CCONJ
fuelectenerg-421	221	8	g.	g.	PROPN
fuelectenerg-421	221	9	temes	temes	PROPN
fuelectenerg-421	221	10	,	,	PUNCT
fuelectenerg-421	221	11	"	"	PUNCT
fuelectenerg-421	221	12	circuit	circuit	NOUN
fuelectenerg-421	221	13	techniques	technique	NOUN
fuelectenerg-421	221	14	for	for	ADP
fuelectenerg-421	221	15	reducing	reduce	VERB
fuelectenerg-421	221	16	the	the	DET
fuelectenerg-421	221	17	effects	effect	NOUN
fuelectenerg-421	221	18	of	of	ADP
fuelectenerg-421	221	19	op	op	NOUN
fuelectenerg-421	221	20	-	-	PUNCT
fuelectenerg-421	221	21	amp	amp	NOUN
fuelectenerg-421	221	22	imperfections	imperfection	NOUN
fuelectenerg-421	221	23	:	:	PUNCT
fuelectenerg-421	221	24	autozeroing	autozeroe	VERB
fuelectenerg-421	221	25	,	,	PUNCT
fuelectenerg-421	221	26	correlated	correlate	VERB
fuelectenerg-421	221	27	double	double	ADJ
fuelectenerg-421	221	28	sampling	sampling	NOUN
fuelectenerg-421	221	29	,	,	PUNCT
fuelectenerg-421	221	30	and	and	CCONJ
fuelectenerg-421	221	31	chopper	chopper	NOUN
fuelectenerg-421	221	32	stabilization	stabilization	NOUN
fuelectenerg-421	221	33	"	"	PUNCT
fuelectenerg-421	221	34	,	,	PUNCT
fuelectenerg-421	221	35	in	in	ADP
fuelectenerg-421	221	36	proceedings	proceeding	NOUN
fuelectenerg-421	221	37	of	of	ADP
fuelectenerg-421	221	38	the	the	DET
fuelectenerg-421	221	39	ieee	ieee	NOUN
fuelectenerg-421	221	40	,	,	PUNCT
fuelectenerg-421	221	41	vol	vol	NOUN
fuelectenerg-421	221	42	.	.	PROPN
fuelectenerg-421	221	43	84	84	NUM
fuelectenerg-421	221	44	,	,	PUNCT
fuelectenerg-421	221	45	no	no	INTJ
fuelectenerg-421	221	46	.	.	NOUN
fuelectenerg-421	221	47	11	11	NUM
fuelectenerg-421	221	48	,	,	PUNCT
fuelectenerg-421	221	49	nov	nov	PROPN
fuelectenerg-421	221	50	1996	1996	NUM
fuelectenerg-421	221	51	,	,	PUNCT
fuelectenerg-421	221	52	pp	pp	ADJ
fuelectenerg-421	221	53	.	.	PUNCT
fuelectenerg-421	221	54	1584–1614	1584–1614	NUM
fuelectenerg-421	221	55	.	.	PUNCT
fuelectenerg-421	222	1	[	[	X
fuelectenerg-421	222	2	20	20	NUM
fuelectenerg-421	222	3	]	]	PUNCT
fuelectenerg-421	222	4	m.	m.	NOUN
fuelectenerg-421	222	5	white	white	PROPN
fuelectenerg-421	222	6	,	,	PUNCT
fuelectenerg-421	222	7	d.	d.	PROPN
fuelectenerg-421	222	8	lampe	lampe	PROPN
fuelectenerg-421	222	9	,	,	PUNCT
fuelectenerg-421	222	10	f.	f.	PROPN
fuelectenerg-421	222	11	blaha	blaha	PROPN
fuelectenerg-421	222	12	,	,	PUNCT
fuelectenerg-421	222	13	i.	i.	PROPN
fuelectenerg-421	222	14	mack	mack	PROPN
fuelectenerg-421	222	15	,	,	PUNCT
fuelectenerg-421	222	16	"	"	PUNCT
fuelectenerg-421	222	17	characterization	characterization	NOUN
fuelectenerg-421	222	18	of	of	ADP
fuelectenerg-421	222	19	surface	surface	NOUN
fuelectenerg-421	222	20	channel	channel	NOUN
fuelectenerg-421	222	21	ccd	ccd	NOUN
fuelectenerg-421	222	22	image	image	NOUN
fuelectenerg-421	222	23	arrays	array	VERB
fuelectenerg-421	222	24	at	at	ADP
fuelectenerg-421	222	25	low	low	ADJ
fuelectenerg-421	222	26	light	light	ADJ
fuelectenerg-421	222	27	levels	level	NOUN
fuelectenerg-421	222	28	"	"	PUNCT
fuelectenerg-421	222	29	,	,	PUNCT
fuelectenerg-421	222	30	ieee	ieee	PROPN
fuelectenerg-421	222	31	journal	journal	PROPN
fuelectenerg-421	222	32	solid	solid	ADJ
fuelectenerg-421	222	33	-	-	PUNCT
fuelectenerg-421	222	34	state	state	NOUN
fuelectenerg-421	222	35	circuits	circuit	NOUN
fuelectenerg-421	222	36	,	,	PUNCT
fuelectenerg-421	222	37	vol	vol	NOUN
fuelectenerg-421	222	38	.	.	PROPN
fuelectenerg-421	223	1	9	9	NUM
fuelectenerg-421	223	2	,	,	PUNCT
fuelectenerg-421	223	3	no	no	INTJ
fuelectenerg-421	223	4	.	.	NOUN
fuelectenerg-421	223	5	1	1	NUM
fuelectenerg-421	223	6	,	,	PUNCT
fuelectenerg-421	223	7	feb	feb	NOUN
fuelectenerg-421	223	8	1974	1974	NUM
fuelectenerg-421	223	9	,	,	PUNCT
fuelectenerg-421	223	10	pp	pp	ADP
fuelectenerg-421	223	11	.	.	PUNCT
fuelectenerg-421	224	1	1–12	1–12	NOUN
fuelectenerg-421	224	2	.	.	PUNCT
fuelectenerg-421	225	1	[	[	X
fuelectenerg-421	225	2	21	21	NUM
fuelectenerg-421	225	3	]	]	X
fuelectenerg-421	225	4	m.	m.	PROPN
fuelectenerg-421	225	5	pederson	pederson	PROPN
fuelectenerg-421	225	6	,	,	PUNCT
fuelectenerg-421	225	7	w.	w.	PROPN
fuelectenerg-421	225	8	olthuis	olthuis	PROPN
fuelectenerg-421	225	9	,	,	PUNCT
fuelectenerg-421	225	10	p.	p.	PROPN
fuelectenerg-421	225	11	bergveld	bergveld	PROPN
fuelectenerg-421	225	12	,	,	PUNCT
fuelectenerg-421	225	13	"	"	PUNCT
fuelectenerg-421	225	14	high	high	ADJ
fuelectenerg-421	225	15	-	-	PUNCT
fuelectenerg-421	225	16	performance	performance	NOUN
fuelectenerg-421	225	17	condenser	condenser	NOUN
fuelectenerg-421	225	18	microphone	microphone	NOUN
fuelectenerg-421	225	19	with	with	ADP
fuelectenerg-421	225	20	fully	fully	ADV
fuelectenerg-421	225	21	integrated	integrate	VERB
fuelectenerg-421	225	22	cmos	cmos	ADJ
fuelectenerg-421	225	23	amplifier	amplifier	NOUN
fuelectenerg-421	225	24	and	and	CCONJ
fuelectenerg-421	225	25	dc	dc	PROPN
fuelectenerg-421	225	26	-	-	PUNCT
fuelectenerg-421	225	27	dc	dc	PROPN
fuelectenerg-421	225	28	voltage	voltage	NOUN
fuelectenerg-421	225	29	converter	converter	NOUN
fuelectenerg-421	225	30	,	,	PUNCT
fuelectenerg-421	225	31	"	"	PUNCT
fuelectenerg-421	225	32	journal	journal	NOUN
fuelectenerg-421	225	33	of	of	ADP
fuelectenerg-421	225	34	microelectromechanical	microelectromechanical	ADJ
fuelectenerg-421	225	35	systems	system	NOUN
fuelectenerg-421	225	36	,	,	PUNCT
fuelectenerg-421	225	37	vol.7	vol.7	PROPN
fuelectenerg-421	225	38	,	,	PUNCT
fuelectenerg-421	225	39	no.4	no.4	PROPN
fuelectenerg-421	225	40	,	,	PUNCT
fuelectenerg-421	225	41	pp	pp	X
fuelectenerg-421	225	42	.	.	PUNCT
fuelectenerg-421	226	1	387–394	387–394	NUM
fuelectenerg-421	226	2	,	,	PUNCT
fuelectenerg-421	226	3	dec	dec	PROPN
fuelectenerg-421	226	4	1998	1998	NUM
fuelectenerg-421	226	5	.	.	PUNCT
fuelectenerg-421	227	1	[	[	X
fuelectenerg-421	227	2	22	22	NUM
fuelectenerg-421	227	3	]	]	X
fuelectenerg-421	227	4	c.	c.	PROPN
fuelectenerg-421	227	5	e.	e.	PROPN
fuelectenerg-421	227	6	furst	furst	PROPN
fuelectenerg-421	227	7	,	,	PUNCT
fuelectenerg-421	227	8	"	"	PUNCT
fuelectenerg-421	227	9	a	a	DET
fuelectenerg-421	227	10	low	low	ADJ
fuelectenerg-421	227	11	-	-	PUNCT
fuelectenerg-421	227	12	noise	noise	NOUN
fuelectenerg-421	227	13	/	/	SYM
fuelectenerg-421	227	14	low	low	ADJ
fuelectenerg-421	227	15	-	-	PUNCT
fuelectenerg-421	227	16	power	power	NOUN
fuelectenerg-421	227	17	preamplifier	preamplifier	NOUN
fuelectenerg-421	227	18	for	for	ADP
fuelectenerg-421	227	19	capacitive	capacitive	ADJ
fuelectenerg-421	227	20	microphones	microphone	NOUN
fuelectenerg-421	227	21	,	,	PUNCT
fuelectenerg-421	227	22	"	"	PUNCT
fuelectenerg-421	227	23	in	in	ADP
fuelectenerg-421	227	24	proceedings	proceeding	NOUN
fuelectenerg-421	227	25	on	on	ADP
fuelectenerg-421	227	26	the	the	DET
fuelectenerg-421	227	27	ieee	ieee	NOUN
fuelectenerg-421	227	28	international	international	ADJ
fuelectenerg-421	227	29	symposium	symposium	NOUN
fuelectenerg-421	227	30	on	on	ADP
fuelectenerg-421	227	31	circuits	circuit	NOUN
fuelectenerg-421	227	32	and	and	CCONJ
fuelectenerg-421	227	33	systems	system	NOUN
fuelectenerg-421	227	34	connecting	connect	VERB
fuelectenerg-421	227	35	the	the	DET
fuelectenerg-421	227	36	world	world	NOUN
fuelectenerg-421	227	37	,	,	PUNCT
fuelectenerg-421	227	38	iscas	iscas	PROPN
fuelectenerg-421	227	39	1996	1996	NUM
fuelectenerg-421	227	40	,	,	PUNCT
fuelectenerg-421	227	41	12	12	NUM
fuelectenerg-421	227	42	-	-	SYM
fuelectenerg-421	227	43	15	15	NUM
fuelectenerg-421	227	44	may	may	NOUN
fuelectenerg-421	227	45	1996	1996	NUM
fuelectenerg-421	227	46	,	,	PUNCT
fuelectenerg-421	227	47	vol	vol	NOUN
fuelectenerg-421	227	48	.	.	PROPN
fuelectenerg-421	227	49	1	1	NUM
fuelectenerg-421	227	50	,	,	PUNCT
fuelectenerg-421	227	51	pp	pp	ADJ
fuelectenerg-421	227	52	.	.	PUNCT
fuelectenerg-421	228	1	477–480	477–480	NUM
fuelectenerg-421	228	2	.	.	PUNCT
fuelectenerg-421	229	1	[	[	X
fuelectenerg-421	229	2	23	23	NUM
fuelectenerg-421	229	3	]	]	PUNCT
fuelectenerg-421	229	4	s.	s.	PROPN
fuelectenerg-421	229	5	a.	a.	PROPN
fuelectenerg-421	229	6	jawed	jawed	PROPN
fuelectenerg-421	229	7	,	,	PUNCT
fuelectenerg-421	229	8	d.	d.	PROPN
fuelectenerg-421	229	9	cattin	cattin	PROPN
fuelectenerg-421	229	10	,	,	PUNCT
fuelectenerg-421	229	11	n.	n.	PROPN
fuelectenerg-421	229	12	massari	massari	PROPN
fuelectenerg-421	229	13	,	,	PUNCT
fuelectenerg-421	229	14	m.	m.	NOUN
fuelectenerg-421	229	15	gottardi	gottardi	NOUN
fuelectenerg-421	229	16	,	,	PUNCT
fuelectenerg-421	229	17	and	and	CCONJ
fuelectenerg-421	229	18	a.	a.	NOUN
fuelectenerg-421	229	19	baschirotto	baschirotto	PROPN
fuelectenerg-421	229	20	,	,	PUNCT
fuelectenerg-421	229	21	"	"	PUNCT
fuelectenerg-421	229	22	a	a	DET
fuelectenerg-421	229	23	mems	mems	ADJ
fuelectenerg-421	229	24	microphone	microphone	NOUN
fuelectenerg-421	229	25	interface	interface	NOUN
fuelectenerg-421	229	26	with	with	ADP
fuelectenerg-421	229	27	force	force	NOUN
fuelectenerg-421	229	28	-	-	PUNCT
fuelectenerg-421	229	29	balancing	balance	VERB
fuelectenerg-421	229	30	and	and	CCONJ
fuelectenerg-421	229	31	charge	charge	NOUN
fuelectenerg-421	229	32	-	-	PUNCT
fuelectenerg-421	229	33	control	control	NOUN
fuelectenerg-421	229	34	"	"	PUNCT
fuelectenerg-421	229	35	,	,	PUNCT
fuelectenerg-421	229	36	in	in	ADP
fuelectenerg-421	229	37	research	research	NOUN
fuelectenerg-421	229	38	in	in	ADP
fuelectenerg-421	229	39	microelectronics	microelectronic	NOUN
fuelectenerg-421	229	40	and	and	CCONJ
fuelectenerg-421	229	41	electronics	electronic	NOUN
fuelectenerg-421	229	42	,	,	PUNCT
fuelectenerg-421	229	43	2008	2008	NUM
fuelectenerg-421	229	44	.	.	PUNCT
fuelectenerg-421	230	1	prime	prime	PROPN
fuelectenerg-421	230	2	2008	2008	NUM
fuelectenerg-421	230	3	.	.	PUNCT
fuelectenerg-421	231	1	ph.d	ph.d	PROPN
fuelectenerg-421	231	2	.	.	PROPN
fuelectenerg-421	231	3	,	,	PUNCT
fuelectenerg-421	231	4	june	june	PROPN
fuelectenerg-421	231	5	2008	2008	NUM
fuelectenerg-421	231	6	,	,	PUNCT
fuelectenerg-421	231	7	pp	pp	ADP
fuelectenerg-421	231	8	.	.	PUNCT
fuelectenerg-421	232	1	97–100	97–100	NUM
fuelectenerg-421	232	2	.	.	PUNCT
fuelectenerg-421	233	1	[	[	X
fuelectenerg-421	233	2	24	24	NUM
fuelectenerg-421	233	3	]	]	PUNCT
fuelectenerg-421	233	4	t.	t.	PROPN
fuelectenerg-421	233	5	ting	ting	PROPN
fuelectenerg-421	233	6	zhang	zhang	PROPN
fuelectenerg-421	233	7	,	,	PUNCT
fuelectenerg-421	233	8	h.-j	h.-j	PROPN
fuelectenerg-421	233	9	.	.	PUNCT
fuelectenerg-421	234	1	li	li	PROPN
fuelectenerg-421	234	2	,	,	PUNCT
fuelectenerg-421	234	3	j.-q	j.-q	PROPN
fuelectenerg-421	234	4	.	.	PUNCT
fuelectenerg-421	235	1	huang	huang	PROPN
fuelectenerg-421	235	2	,	,	PUNCT
fuelectenerg-421	235	3	m.	m.	NOUN
fuelectenerg-421	235	4	zhao	zhao	PROPN
fuelectenerg-421	235	5	,	,	PUNCT
fuelectenerg-421	235	6	l.-c	l.-c	PROPN
fuelectenerg-421	235	7	.	.	PUNCT
fuelectenerg-421	236	1	hong	hong	PROPN
fuelectenerg-421	236	2	,	,	PUNCT
fuelectenerg-421	236	3	y.-c	y.-c	PROPN
fuelectenerg-421	236	4	.	.	PUNCT
fuelectenerg-421	237	1	zhang	zhang	PROPN
fuelectenerg-421	237	2	,	,	PUNCT
fuelectenerg-421	237	3	w.-g	w.-g	PROPN
fuelectenerg-421	237	4	.	.	PUNCT
fuelectenerg-421	238	1	lu	lu	PROPN
fuelectenerg-421	238	2	,	,	PUNCT
fuelectenerg-421	238	3	and	and	CCONJ
fuelectenerg-421	238	4	z.-j	z.-j	PROPN
fuelectenerg-421	238	5	.	.	PUNCT
fuelectenerg-421	239	1	chen	chen	PROPN
fuelectenerg-421	239	2	,	,	PUNCT
fuelectenerg-421	239	3	"	"	PUNCT
fuelectenerg-421	239	4	an	an	DET
fuelectenerg-421	239	5	offset	offset	NOUN
fuelectenerg-421	239	6	-	-	PUNCT
fuelectenerg-421	239	7	compensated	compensate	VERB
fuelectenerg-421	239	8	switched	switch	VERB
fuelectenerg-421	239	9	-	-	PUNCT
fuelectenerg-421	239	10	capacitor	capacitor	NOUN
fuelectenerg-421	239	11	interface	interface	NOUN
fuelectenerg-421	239	12	circuit	circuit	NOUN
fuelectenerg-421	239	13	for	for	ADP
fuelectenerg-421	239	14	closed	closed	ADJ
fuelectenerg-421	239	15	-	-	PUNCT
fuelectenerg-421	239	16	loop	loop	NOUN
fuelectenerg-421	239	17	mems	mem	NOUN
fuelectenerg-421	239	18	capacitive	capacitive	ADJ
fuelectenerg-421	239	19	accelerometer	accelerometer	NOUN
fuelectenerg-421	239	20	"	"	PUNCT
fuelectenerg-421	239	21	,	,	PUNCT
fuelectenerg-421	239	22	in	in	ADP
fuelectenerg-421	239	23	proceedings	proceeding	NOUN
fuelectenerg-421	239	24	on	on	ADP
fuelectenerg-421	239	25	the	the	DET
fuelectenerg-421	239	26	ieee	ieee	NOUN
fuelectenerg-421	239	27	11th	11th	PROPN
fuelectenerg-421	239	28	international	international	ADJ
fuelectenerg-421	239	29	conference	conference	NOUN
fuelectenerg-421	239	30	on	on	ADP
fuelectenerg-421	239	31	solid	solid	ADJ
fuelectenerg-421	239	32	-	-	PUNCT
fuelectenerg-421	239	33	state	state	NOUN
fuelectenerg-421	239	34	and	and	CCONJ
fuelectenerg-421	239	35	integrated	integrated	ADJ
fuelectenerg-421	239	36	circuit	circuit	NOUN
fuelectenerg-421	239	37	technology	technology	NOUN
fuelectenerg-421	239	38	,	,	PUNCT
fuelectenerg-421	239	39	icsict	icsict	PROPN
fuelectenerg-421	239	40	2012	2012	NUM
fuelectenerg-421	239	41	,	,	PUNCT
fuelectenerg-421	239	42	oct	oct	PROPN
fuelectenerg-421	239	43	2012	2012	NUM
fuelectenerg-421	239	44	,	,	PUNCT
fuelectenerg-421	239	45	pp	pp	ADP
fuelectenerg-421	239	46	.	.	PUNCT
fuelectenerg-421	240	1	1–3	1–3	NOUN
fuelectenerg-421	240	2	.	.	PUNCT
fuelectenerg-421	241	1	[	[	X
fuelectenerg-421	241	2	25	25	NUM
fuelectenerg-421	241	3	]	]	PUNCT
fuelectenerg-421	241	4	l.	l.	PROPN
fuelectenerg-421	241	5	dong	dong	PROPN
fuelectenerg-421	241	6	-	-	PUNCT
fuelectenerg-421	241	7	hyuk	hyuk	PROPN
fuelectenerg-421	241	8	,	,	PUNCT
fuelectenerg-421	241	9	l.	l.	PROPN
fuelectenerg-421	241	10	sang	sang	PROPN
fuelectenerg-421	241	11	-	-	PUNCT
fuelectenerg-421	241	12	yoon	yoon	PROPN
fuelectenerg-421	241	13	,	,	PUNCT
fuelectenerg-421	241	14	c.	c.	PROPN
fuelectenerg-421	241	15	woo	woo	PROPN
fuelectenerg-421	241	16	-	-	PUNCT
fuelectenerg-421	241	17	seok	seok	PROPN
fuelectenerg-421	241	18	,	,	PUNCT
fuelectenerg-421	241	19	p.	p.	PROPN
fuelectenerg-421	241	20	jun	jun	PROPN
fuelectenerg-421	241	21	-	-	PUNCT
fuelectenerg-421	241	22	eun	eun	PROPN
fuelectenerg-421	241	23	,	,	PUNCT
fuelectenerg-421	241	24	and	and	CCONJ
fuelectenerg-421	241	25	d.-k	d.-k	PROPN
fuelectenerg-421	241	26	.	.	PUNCT
fuelectenerg-421	242	1	j.	j.	PROPN
fuelectenerg-421	242	2	,	,	PUNCT
fuelectenerg-421	242	3	"	"	PUNCT
fuelectenerg-421	242	4	a	a	DET
fuelectenerg-421	242	5	digital	digital	ADJ
fuelectenerg-421	242	6	readout	readout	NOUN
fuelectenerg-421	242	7	ic	ic	INTJ
fuelectenerg-421	242	8	with	with	ADP
fuelectenerg-421	242	9	digital	digital	ADJ
fuelectenerg-421	242	10	offset	offset	VERB
fuelectenerg-421	242	11	canceller	canceller	NOUN
fuelectenerg-421	242	12	for	for	ADP
fuelectenerg-421	242	13	capacitive	capacitive	ADJ
fuelectenerg-421	242	14	sensors	sensor	NOUN
fuelectenerg-421	242	15	"	"	PUNCT
fuelectenerg-421	242	16	,	,	PUNCT
fuelectenerg-421	242	17	journal	journal	NOUN
fuelectenerg-421	242	18	of	of	ADP
fuelectenerg-421	242	19	semiconductor	semiconductor	NOUN
fuelectenerg-421	242	20	technology	technology	NOUN
fuelectenerg-421	242	21	and	and	CCONJ
fuelectenerg-421	242	22	science	science	NOUN
fuelectenerg-421	242	23	,	,	PUNCT
fuelectenerg-421	242	24	vol	vol	NOUN
fuelectenerg-421	242	25	.	.	PROPN
fuelectenerg-421	242	26	12	12	NUM
fuelectenerg-421	242	27	,	,	PUNCT
fuelectenerg-421	242	28	no	no	INTJ
fuelectenerg-421	242	29	.	.	NOUN
fuelectenerg-421	242	30	3	3	NUM
fuelectenerg-421	242	31	,	,	PUNCT
fuelectenerg-421	242	32	pp	pp	ADJ
fuelectenerg-421	242	33	.	.	PUNCT
fuelectenerg-421	243	1	278–285	278–285	NUM
fuelectenerg-421	243	2	,	,	PUNCT
fuelectenerg-421	243	3	2012	2012	NUM
fuelectenerg-421	243	4	.	.	PUNCT
fuelectenerg-421	244	1	[	[	X
fuelectenerg-421	244	2	26	26	NUM
fuelectenerg-421	244	3	]	]	PUNCT
fuelectenerg-421	244	4	b.	b.	PROPN
fuelectenerg-421	244	5	fowler	fowler	PROPN
fuelectenerg-421	244	6	,	,	PUNCT
fuelectenerg-421	244	7	m.	m.	NOUN
fuelectenerg-421	244	8	godfrey	godfrey	PROPN
fuelectenerg-421	244	9	,	,	PUNCT
fuelectenerg-421	244	10	and	and	CCONJ
fuelectenerg-421	244	11	s.	s.	PROPN
fuelectenerg-421	244	12	mims	mims	PROPN
fuelectenerg-421	244	13	,	,	PUNCT
fuelectenerg-421	244	14	"	"	PUNCT
fuelectenerg-421	244	15	reset	reset	NOUN
fuelectenerg-421	244	16	noise	noise	NOUN
fuelectenerg-421	244	17	reduction	reduction	NOUN
fuelectenerg-421	244	18	in	in	ADP
fuelectenerg-421	244	19	capacitive	capacitive	ADJ
fuelectenerg-421	244	20	sensors	sensor	NOUN
fuelectenerg-421	244	21	"	"	PUNCT
fuelectenerg-421	244	22	,	,	PUNCT
fuelectenerg-421	244	23	ieee	ieee	NOUN
fuelectenerg-421	244	24	transactions	transaction	NOUN
fuelectenerg-421	244	25	on	on	ADP
fuelectenerg-421	244	26	circuits	circuit	NOUN
fuelectenerg-421	244	27	and	and	CCONJ
fuelectenerg-421	244	28	systems	system	NOUN
fuelectenerg-421	244	29	i	i	PRON
fuelectenerg-421	244	30	:	:	PUNCT
fuelectenerg-421	244	31	regular	regular	ADJ
fuelectenerg-421	244	32	papers	paper	NOUN
fuelectenerg-421	244	33	,	,	PUNCT
fuelectenerg-421	244	34	vol	vol	NOUN
fuelectenerg-421	244	35	.	.	PROPN
fuelectenerg-421	244	36	53	53	NUM
fuelectenerg-421	244	37	,	,	PUNCT
fuelectenerg-421	244	38	no	no	INTJ
fuelectenerg-421	244	39	.	.	NOUN
fuelectenerg-421	244	40	8	8	NUM
fuelectenerg-421	244	41	,	,	PUNCT
fuelectenerg-421	244	42	pp	pp	ADJ
fuelectenerg-421	244	43	.	.	PUNCT
fuelectenerg-421	244	44	1658–1669	1658–1669	NUM
fuelectenerg-421	244	45	,	,	PUNCT
fuelectenerg-421	244	46	aug	aug	PROPN
fuelectenerg-421	244	47	2006	2006	NUM
fuelectenerg-421	244	48	.	.	PUNCT
fuelectenerg-421	245	1	[	[	X
fuelectenerg-421	245	2	27	27	NUM
fuelectenerg-421	245	3	]	]	X
fuelectenerg-421	245	4	f.	f.	PROPN
fuelectenerg-421	245	5	aezinia	aezinia	PROPN
fuelectenerg-421	245	6	and	and	CCONJ
fuelectenerg-421	245	7	b.	b.	PROPN
fuelectenerg-421	245	8	bahreyni	bahreyni	PROPN
fuelectenerg-421	245	9	,	,	PUNCT
fuelectenerg-421	245	10	"	"	PUNCT
fuelectenerg-421	245	11	a	a	DET
fuelectenerg-421	245	12	readout	readout	NOUN
fuelectenerg-421	245	13	circuit	circuit	NOUN
fuelectenerg-421	245	14	with	with	ADP
fuelectenerg-421	245	15	wide	wide	ADJ
fuelectenerg-421	245	16	dynamic	dynamic	ADJ
fuelectenerg-421	245	17	range	range	NOUN
fuelectenerg-421	245	18	for	for	ADP
fuelectenerg-421	245	19	differential	differential	ADJ
fuelectenerg-421	245	20	capacitive	capacitive	ADJ
fuelectenerg-421	245	21	sensing	sense	VERB
fuelectenerg-421	245	22	applications	application	NOUN
fuelectenerg-421	245	23	"	"	PUNCT
fuelectenerg-421	245	24	,	,	PUNCT
fuelectenerg-421	245	25	in	in	ADP
fuelectenerg-421	245	26	proceedings	proceeding	NOUN
fuelectenerg-421	245	27	26th	26th	NOUN
fuelectenerg-421	245	28	annual	annual	ADJ
fuelectenerg-421	245	29	ieee	ieee	NOUN
fuelectenerg-421	245	30	canadian	canadian	PROPN
fuelectenerg-421	245	31	conference	conference	NOUN
fuelectenerg-421	245	32	on	on	ADP
fuelectenerg-421	245	33	electrical	electrical	ADJ
fuelectenerg-421	245	34	and	and	CCONJ
fuelectenerg-421	245	35	computer	computer	NOUN
fuelectenerg-421	245	36	engineering	engineering	NOUN
fuelectenerg-421	245	37	,	,	PUNCT
fuelectenerg-421	245	38	ccece	ccece	PROPN
fuelectenerg-421	245	39	2013	2013	NUM
fuelectenerg-421	245	40	,	,	PUNCT
fuelectenerg-421	245	41	may	may	AUX
fuelectenerg-421	245	42	2013	2013	NUM
fuelectenerg-421	245	43	,	,	PUNCT
fuelectenerg-421	245	44	pp	pp	ADV
fuelectenerg-421	245	45	.	.	PUNCT
fuelectenerg-421	246	1	1–4	1–4	NUM
fuelectenerg-421	246	2	.	.	PUNCT
fuelectenerg-421	247	1	[	[	X
fuelectenerg-421	247	2	28	28	NUM
fuelectenerg-421	247	3	]	]	X
fuelectenerg-421	247	4	j.-l	j.-l	ADJ
fuelectenerg-421	247	5	.	.	PUNCT
fuelectenerg-421	248	1	lu	lu	PROPN
fuelectenerg-421	248	2	,	,	PUNCT
fuelectenerg-421	248	3	m.	m.	NOUN
fuelectenerg-421	248	4	inerowicz	inerowicz	PROPN
fuelectenerg-421	248	5	,	,	PUNCT
fuelectenerg-421	248	6	s.	s.	PROPN
fuelectenerg-421	248	7	joo	joo	PROPN
fuelectenerg-421	248	8	,	,	PUNCT
fuelectenerg-421	248	9	j.-k	j.-k	PROPN
fuelectenerg-421	248	10	.	.	PUNCT
fuelectenerg-421	249	1	kwon	kwon	PROPN
fuelectenerg-421	249	2	,	,	PUNCT
fuelectenerg-421	249	3	and	and	CCONJ
fuelectenerg-421	249	4	b.	b.	PROPN
fuelectenerg-421	249	5	jung	jung	PROPN
fuelectenerg-421	249	6	,	,	PUNCT
fuelectenerg-421	249	7	"	"	PUNCT
fuelectenerg-421	249	8	a	a	DET
fuelectenerg-421	249	9	low	low	ADJ
fuelectenerg-421	249	10	-	-	PUNCT
fuelectenerg-421	249	11	power	power	NOUN
fuelectenerg-421	249	12	,	,	PUNCT
fuelectenerg-421	249	13	wide	wide	ADJ
fuelectenerg-421	249	14	-	-	PUNCT
fuelectenerg-421	249	15	dynamic	dynamic	ADJ
fuelectenerg-421	249	16	-	-	PUNCT
fuelectenerg-421	249	17	range	range	NOUN
fuelectenerg-421	249	18	semidigital	semidigital	ADJ
fuelectenerg-421	249	19	universal	universal	ADJ
fuelectenerg-421	249	20	sensor	sensor	NOUN
fuelectenerg-421	249	21	readout	readout	VERB
fuelectenerg-421	249	22	circuit	circuit	NOUN
fuelectenerg-421	249	23	using	use	VERB
fuelectenerg-421	249	24	pulsewidth	pulsewidth	ADJ
fuelectenerg-421	249	25	modulation	modulation	NOUN
fuelectenerg-421	249	26	"	"	PUNCT
fuelectenerg-421	249	27	,	,	PUNCT
fuelectenerg-421	249	28	ieee	ieee	NOUN
fuelectenerg-421	249	29	sensors	sensor	NOUN
fuelectenerg-421	249	30	journal	journal	PROPN
fuelectenerg-421	249	31	,	,	PUNCT
fuelectenerg-421	249	32	vol	vol	NOUN
fuelectenerg-421	249	33	.	.	PROPN
fuelectenerg-421	250	1	11	11	NUM
fuelectenerg-421	250	2	,	,	PUNCT
fuelectenerg-421	250	3	no	no	INTJ
fuelectenerg-421	250	4	.	.	NOUN
fuelectenerg-421	250	5	5	5	NUM
fuelectenerg-421	250	6	,	,	PUNCT
fuelectenerg-421	250	7	pp	pp	ADJ
fuelectenerg-421	250	8	.	.	PUNCT
fuelectenerg-421	251	1	1134–1144	1134–1144	NUM
fuelectenerg-421	251	2	,	,	PUNCT
fuelectenerg-421	251	3	may	may	AUX
fuelectenerg-421	251	4	2011	2011	NUM
fuelectenerg-421	251	5	.	.	PUNCT
fuelectenerg-421	252	1	[	[	X
fuelectenerg-421	252	2	29	29	NUM
fuelectenerg-421	252	3	]	]	X
fuelectenerg-421	252	4	m.	m.	PROPN
fuelectenerg-421	252	5	lee	lee	PROPN
fuelectenerg-421	252	6	,	,	PUNCT
fuelectenerg-421	252	7	s.	s.	PROPN
fuelectenerg-421	252	8	lee	lee	PROPN
fuelectenerg-421	252	9	,	,	PUNCT
fuelectenerg-421	252	10	s.	s.	PROPN
fuelectenerg-421	252	11	jung	jung	PROPN
fuelectenerg-421	252	12	,	,	PUNCT
fuelectenerg-421	252	13	c.	c.	PROPN
fuelectenerg-421	252	14	je	je	PROPN
fuelectenerg-421	252	15	,	,	PUNCT
fuelectenerg-421	252	16	g.	g.	PROPN
fuelectenerg-421	252	17	hwang	hwang	PROPN
fuelectenerg-421	252	18	,	,	PUNCT
fuelectenerg-421	252	19	and	and	CCONJ
fuelectenerg-421	252	20	c.	c.	PROPN
fuelectenerg-421	252	21	choi	choi	NOUN
fuelectenerg-421	252	22	,	,	PUNCT
fuelectenerg-421	252	23	"	"	PUNCT
fuelectenerg-421	252	24	design	design	NOUN
fuelectenerg-421	252	25	,	,	PUNCT
fuelectenerg-421	252	26	fabrication	fabrication	NOUN
fuelectenerg-421	252	27	,	,	PUNCT
fuelectenerg-421	252	28	and	and	CCONJ
fuelectenerg-421	252	29	characterization	characterization	NOUN
fuelectenerg-421	252	30	of	of	ADP
fuelectenerg-421	252	31	a	a	DET
fuelectenerg-421	252	32	readout	readout	NOUN
fuelectenerg-421	252	33	integrated	integrate	VERB
fuelectenerg-421	252	34	circuit	circuit	NOUN
fuelectenerg-421	252	35	(	(	PUNCT
fuelectenerg-421	252	36	roic	roic	ADJ
fuelectenerg-421	252	37	)	)	PUNCT
fuelectenerg-421	252	38	for	for	ADP
fuelectenerg-421	252	39	capacitive	capacitive	ADJ
fuelectenerg-421	252	40	mems	mem	NOUN
fuelectenerg-421	252	41	sensors	sensor	NOUN
fuelectenerg-421	252	42	"	"	PUNCT
fuelectenerg-421	252	43	,	,	PUNCT
fuelectenerg-421	252	44	sensors	sensor	NOUN
fuelectenerg-421	252	45	,	,	PUNCT
fuelectenerg-421	252	46	2007	2007	NUM
fuelectenerg-421	252	47	ieee	ieee	NOUN
fuelectenerg-421	252	48	,	,	PUNCT
fuelectenerg-421	252	49	pp	pp	ADJ
fuelectenerg-421	252	50	.	.	PUNCT
fuelectenerg-421	253	1	260–263	260–263	NUM
fuelectenerg-421	253	2	.	.	PUNCT
fuelectenerg-421	253	3	oct	oct	PROPN
fuelectenerg-421	253	4	2007	2007	NUM
fuelectenerg-421	253	5	.	.	PUNCT
fuelectenerg-421	254	1	[	[	X
fuelectenerg-421	254	2	30	30	NUM
fuelectenerg-421	254	3	]	]	PUNCT
fuelectenerg-421	254	4	j.	j.	PROPN
fuelectenerg-421	254	5	shiah	shiah	PROPN
fuelectenerg-421	254	6	,	,	PUNCT
fuelectenerg-421	254	7	h.	h.	PROPN
fuelectenerg-421	254	8	rashtian	rashtian	PROPN
fuelectenerg-421	254	9	,	,	PUNCT
fuelectenerg-421	254	10	and	and	CCONJ
fuelectenerg-421	254	11	s.	s.	PROPN
fuelectenerg-421	254	12	mirabbasi	mirabbasi	PROPN
fuelectenerg-421	254	13	,	,	PUNCT
fuelectenerg-421	254	14	"	"	PUNCT
fuelectenerg-421	254	15	a	a	DET
fuelectenerg-421	254	16	low	low	ADJ
fuelectenerg-421	254	17	-	-	PUNCT
fuelectenerg-421	254	18	noise	noise	NOUN
fuelectenerg-421	254	19	parasitic	parasitic	ADJ
fuelectenerg-421	254	20	-	-	PUNCT
fuelectenerg-421	254	21	insensitive	insensitive	ADJ
fuelectenerg-421	254	22	switched	switch	VERB
fuelectenerg-421	254	23	-	-	PUNCT
fuelectenerg-421	254	24	capacitor	capacitor	NOUN
fuelectenerg-421	254	25	cmos	cmos	PROPN
fuelectenerg-421	254	26	interface	interface	NOUN
fuelectenerg-421	254	27	circuit	circuit	NOUN
fuelectenerg-421	254	28	for	for	ADP
fuelectenerg-421	254	29	mems	mem	NOUN
fuelectenerg-421	254	30	capacitive	capacitive	ADJ
fuelectenerg-421	254	31	sensors	sensor	NOUN
fuelectenerg-421	254	32	"	"	PUNCT
fuelectenerg-421	254	33	,	,	PUNCT
fuelectenerg-421	254	34	in	in	ADP
fuelectenerg-421	254	35	proceedings	proceeding	NOUN
fuelectenerg-421	254	36	on	on	ADP
fuelectenerg-421	254	37	the	the	DET
fuelectenerg-421	254	38	ieee	ieee	NOUN
fuelectenerg-421	254	39	9th	9th	ADJ
fuelectenerg-421	254	40	international	international	ADJ
fuelectenerg-421	254	41	new	new	ADJ
fuelectenerg-421	254	42	circuits	circuit	NOUN
fuelectenerg-421	254	43	and	and	CCONJ
fuelectenerg-421	254	44	systems	system	NOUN
fuelectenerg-421	254	45	conference	conference	NOUN
fuelectenerg-421	254	46	,	,	PUNCT
fuelectenerg-421	254	47	newcas	newcas	ADV
fuelectenerg-421	254	48	2011	2011	NUM
fuelectenerg-421	254	49	,	,	PUNCT
fuelectenerg-421	254	50	june	june	PROPN
fuelectenerg-421	254	51	2011	2011	NUM
fuelectenerg-421	254	52	,	,	PUNCT
fuelectenerg-421	254	53	pp	pp	ADV
fuelectenerg-421	254	54	.	.	PUNCT
fuelectenerg-421	255	1	470–473	470–473	NUM
fuelectenerg-421	255	2	.	.	PUNCT
fuelectenerg-421	256	1	[	[	X
fuelectenerg-421	256	2	31	31	NUM
fuelectenerg-421	256	3	]	]	PUNCT
fuelectenerg-421	256	4	j.	j.	PROPN
fuelectenerg-421	256	5	shiah	shiah	PROPN
fuelectenerg-421	256	6	and	and	CCONJ
fuelectenerg-421	256	7	s.	s.	PROPN
fuelectenerg-421	256	8	mirabbasi	mirabbasi	PROPN
fuelectenerg-421	256	9	,	,	PUNCT
fuelectenerg-421	256	10	"	"	PUNCT
fuelectenerg-421	256	11	a	a	DET
fuelectenerg-421	256	12	5	5	NUM
fuelectenerg-421	256	13	-	-	PUNCT
fuelectenerg-421	256	14	v	v	NOUN
fuelectenerg-421	256	15	555	555	NUM
fuelectenerg-421	256	16	-	-	NOUN
fuelectenerg-421	256	17	μw	μw	NOUN
fuelectenerg-421	256	18	0.8	0.8	NUM
fuelectenerg-421	256	19	-	-	PUNCT
fuelectenerg-421	256	20	μm	μm	NOUN
fuelectenerg-421	256	21	cmos	cmos	NOUN
fuelectenerg-421	256	22	mems	mem	NOUN
fuelectenerg-421	256	23	capacitive	capacitive	ADJ
fuelectenerg-421	256	24	sensor	sensor	NOUN
fuelectenerg-421	256	25	interface	interface	NOUN
fuelectenerg-421	256	26	using	use	VERB
fuelectenerg-421	256	27	correlated	correlate	VERB
fuelectenerg-421	256	28	level	level	NOUN
fuelectenerg-421	256	29	shifting	shift	VERB
fuelectenerg-421	256	30	"	"	PUNCT
fuelectenerg-421	256	31	,	,	PUNCT
fuelectenerg-421	256	32	in	in	ADP
fuelectenerg-421	256	33	proceedings	proceeding	NOUN
fuelectenerg-421	256	34	on	on	ADP
fuelectenerg-421	256	35	the	the	DET
fuelectenerg-421	256	36	ieee	ieee	NOUN
fuelectenerg-421	256	37	international	international	ADJ
fuelectenerg-421	256	38	symposium	symposium	NOUN
fuelectenerg-421	256	39	on	on	ADP
fuelectenerg-421	256	40	circuits	circuit	NOUN
fuelectenerg-421	256	41	and	and	CCONJ
fuelectenerg-421	256	42	systems	system	NOUN
fuelectenerg-421	256	43	,	,	PUNCT
fuelectenerg-421	256	44	iscas	iscas	PROPN
fuelectenerg-421	256	45	2013	2013	NUM
fuelectenerg-421	256	46	,	,	PUNCT
fuelectenerg-421	256	47	may	may	AUX
fuelectenerg-421	256	48	2013	2013	NUM
fuelectenerg-421	256	49	,	,	PUNCT
fuelectenerg-421	256	50	pp	pp	ADJ
fuelectenerg-421	256	51	.	.	PUNCT
fuelectenerg-421	256	52	1504–1507	1504–1507	NUM
fuelectenerg-421	256	53	.	.	PUNCT