id	sid	tid	token	lemma	pos
fuelectenerg-480	1	1	instruction	instruction	NOUN
fuelectenerg-480	1	2	facta	facta	PROPN
fuelectenerg-480	1	3	universitatis	universitatis	PROPN
fuelectenerg-480	1	4	series	series	NOUN
fuelectenerg-480	1	5	:	:	PUNCT
fuelectenerg-480	1	6	electronics	electronic	NOUN
fuelectenerg-480	1	7	and	and	CCONJ
fuelectenerg-480	1	8	energetics	energetics	NOUN
fuelectenerg-480	1	9	vol	vol	NOUN
fuelectenerg-480	1	10	.	.	PUNCT
fuelectenerg-480	1	11	28	28	NUM
fuelectenerg-480	1	12	,	,	PUNCT
fuelectenerg-480	1	13	no	no	DET
fuelectenerg-480	1	14	2	2	NUM
fuelectenerg-480	1	15	,	,	PUNCT
fuelectenerg-480	1	16	june	june	PROPN
fuelectenerg-480	1	17	2015	2015	NUM
fuelectenerg-480	1	18	,	,	PUNCT
fuelectenerg-480	1	19	pp	pp	ADJ
fuelectenerg-480	1	20	.	.	PUNCT
fuelectenerg-480	2	1	287	287	NUM
fuelectenerg-480	2	2	296	296	NUM
fuelectenerg-480	2	3	doi	doi	NOUN
fuelectenerg-480	2	4	:	:	PUNCT
fuelectenerg-480	2	5	10.2298	10.2298	NUM
fuelectenerg-480	2	6	/	/	SYM
fuelectenerg-480	2	7	fuee1502287k	fuee1502287k	ADJ
fuelectenerg-480	2	8	performance	performance	NOUN
fuelectenerg-480	2	9	analysis	analysis	NOUN
fuelectenerg-480	2	10	of	of	ADP
fuelectenerg-480	2	11	a	a	DET
fuelectenerg-480	2	12	flexible	flexible	ADJ
fuelectenerg-480	2	13	polyimide	polyimide	NOUN
fuelectenerg-480	2	14	based	base	VERB
fuelectenerg-480	2	15	device	device	NOUN
fuelectenerg-480	2	16	for	for	ADP
fuelectenerg-480	2	17	displacement	displacement	ADJ
fuelectenerg-480	2	18	sensing	sense	VERB
fuelectenerg-480	2	19			PROPN
fuelectenerg-480	2	20	milica	milica	PROPN
fuelectenerg-480	2	21	g.	g.	PROPN
fuelectenerg-480	2	22	kisić	kisić	PROPN
fuelectenerg-480	2	23	1	1	NUM
fuelectenerg-480	2	24	,	,	PUNCT
fuelectenerg-480	2	25	nelu	nelu	NOUN
fuelectenerg-480	2	26	v.	v.	ADP
fuelectenerg-480	2	27	blaž	blaž	PROPN
fuelectenerg-480	2	28	1	1	NUM
fuelectenerg-480	2	29	,	,	PUNCT
fuelectenerg-480	2	30	kalman	kalman	PROPN
fuelectenerg-480	2	31	b.	b.	PROPN
fuelectenerg-480	2	32	babković	babković	PROPN
fuelectenerg-480	2	33	1	1	NUM
fuelectenerg-480	2	34	,	,	PUNCT
fuelectenerg-480	2	35	andrea	andrea	PROPN
fuelectenerg-480	2	36	marić	marić	PROPN
fuelectenerg-480	2	37	1	1	NUM
fuelectenerg-480	2	38	,	,	PUNCT
fuelectenerg-480	2	39	goran	goran	PROPN
fuelectenerg-480	2	40	j.	j.	PROPN
fuelectenerg-480	2	41	radosavljević	radosavljević	PROPN
fuelectenerg-480	2	42	2	2	NUM
fuelectenerg-480	2	43	,	,	PUNCT
fuelectenerg-480	2	44	ljiljana	ljiljana	PROPN
fuelectenerg-480	2	45	d.	d.	PROPN
fuelectenerg-480	2	46	živanov	živanov	PROPN
fuelectenerg-480	2	47	1	1	NUM
fuelectenerg-480	2	48	,	,	PUNCT
fuelectenerg-480	2	49	mirjana	mirjana	PROPN
fuelectenerg-480	2	50	s.	s.	PROPN
fuelectenerg-480	2	51	damnjanović	damnjanović	PROPN
fuelectenerg-480	2	52	1	1	NUM
fuelectenerg-480	2	53	1	1	NUM
fuelectenerg-480	2	54	faculty	faculty	NOUN
fuelectenerg-480	2	55	of	of	ADP
fuelectenerg-480	2	56	technical	technical	ADJ
fuelectenerg-480	2	57	sciences	sciences	PROPN
fuelectenerg-480	2	58	,	,	PUNCT
fuelectenerg-480	2	59	university	university	NOUN
fuelectenerg-480	2	60	of	of	ADP
fuelectenerg-480	2	61	novi	novi	PROPN
fuelectenerg-480	2	62	sad	sad	PROPN
fuelectenerg-480	2	63	,	,	PUNCT
fuelectenerg-480	2	64	novi	novi	PROPN
fuelectenerg-480	2	65	sad	sad	PROPN
fuelectenerg-480	2	66	,	,	PUNCT
fuelectenerg-480	2	67	serbia	serbia	PROPN
fuelectenerg-480	2	68	2	2	NUM
fuelectenerg-480	2	69	institute	institute	NOUN
fuelectenerg-480	2	70	for	for	ADP
fuelectenerg-480	2	71	sensor	sensor	NOUN
fuelectenerg-480	2	72	and	and	CCONJ
fuelectenerg-480	2	73	actuator	actuator	NOUN
fuelectenerg-480	2	74	systems	system	NOUN
fuelectenerg-480	2	75	,	,	PUNCT
fuelectenerg-480	2	76	vienna	vienna	PROPN
fuelectenerg-480	2	77	university	university	PROPN
fuelectenerg-480	2	78	of	of	ADP
fuelectenerg-480	2	79	technology	technology	PROPN
fuelectenerg-480	2	80	,	,	PUNCT
fuelectenerg-480	2	81	vienna	vienna	PROPN
fuelectenerg-480	2	82	,	,	PUNCT
fuelectenerg-480	2	83	austria	austria	PROPN
fuelectenerg-480	2	84	abstract	abstract	NOUN
fuelectenerg-480	2	85	.	.	PUNCT
fuelectenerg-480	3	1	in	in	ADP
fuelectenerg-480	3	2	this	this	DET
fuelectenerg-480	3	3	work	work	NOUN
fuelectenerg-480	3	4	,	,	PUNCT
fuelectenerg-480	3	5	two	two	NUM
fuelectenerg-480	3	6	variations	variation	NOUN
fuelectenerg-480	3	7	of	of	ADP
fuelectenerg-480	3	8	the	the	DET
fuelectenerg-480	3	9	displacement	displacement	ADJ
fuelectenerg-480	3	10	sensor	sensor	NOUN
fuelectenerg-480	3	11	,	,	PUNCT
fuelectenerg-480	3	12	based	base	VERB
fuelectenerg-480	3	13	on	on	ADP
fuelectenerg-480	3	14	the	the	DET
fuelectenerg-480	3	15	heterogeneous	heterogeneous	ADJ
fuelectenerg-480	3	16	integration	integration	NOUN
fuelectenerg-480	3	17	process	process	NOUN
fuelectenerg-480	3	18	of	of	ADP
fuelectenerg-480	3	19	traditional	traditional	ADJ
fuelectenerg-480	3	20	fabrication	fabrication	NOUN
fuelectenerg-480	3	21	technologies	technology	NOUN
fuelectenerg-480	3	22	pcb	pcb	NOUN
fuelectenerg-480	3	23	(	(	PUNCT
fuelectenerg-480	3	24	printed	print	VERB
fuelectenerg-480	3	25	circuit	circuit	PROPN
fuelectenerg-480	3	26	board	board	PROPN
fuelectenerg-480	3	27	)	)	PUNCT
fuelectenerg-480	3	28	and	and	CCONJ
fuelectenerg-480	3	29	ltcc	ltcc	ADP
fuelectenerg-480	3	30	(	(	PUNCT
fuelectenerg-480	3	31	low	low	ADJ
fuelectenerg-480	3	32	temperature	temperature	NOUN
fuelectenerg-480	3	33	co	co	ADJ
fuelectenerg-480	3	34	-	-	ADJ
fuelectenerg-480	3	35	fired	fire	VERB
fuelectenerg-480	3	36	technology	technology	NOUN
fuelectenerg-480	3	37	)	)	PUNCT
fuelectenerg-480	3	38	with	with	ADP
fuelectenerg-480	3	39	a	a	DET
fuelectenerg-480	3	40	flexible	flexible	ADJ
fuelectenerg-480	3	41	polyimide	polyimide	NOUN
fuelectenerg-480	3	42	foil	foil	NOUN
fuelectenerg-480	3	43	are	be	AUX
fuelectenerg-480	3	44	presented	present	VERB
fuelectenerg-480	3	45	.	.	PUNCT
fuelectenerg-480	4	1	the	the	DET
fuelectenerg-480	4	2	proposed	propose	VERB
fuelectenerg-480	4	3	sensor	sensor	NOUN
fuelectenerg-480	4	4	uses	use	VERB
fuelectenerg-480	4	5	the	the	DET
fuelectenerg-480	4	6	coil	coil	NOUN
fuelectenerg-480	4	7	as	as	ADP
fuelectenerg-480	4	8	an	an	DET
fuelectenerg-480	4	9	essential	essential	ADJ
fuelectenerg-480	4	10	part	part	NOUN
fuelectenerg-480	4	11	,	,	PUNCT
fuelectenerg-480	4	12	spacer	spacer	NOUN
fuelectenerg-480	4	13	and	and	CCONJ
fuelectenerg-480	4	14	a	a	DET
fuelectenerg-480	4	15	polyimide	polyimide	ADJ
fuelectenerg-480	4	16	foil	foil	NOUN
fuelectenerg-480	4	17	as	as	ADP
fuelectenerg-480	4	18	a	a	DET
fuelectenerg-480	4	19	flexible	flexible	ADJ
fuelectenerg-480	4	20	membrane	membrane	NOUN
fuelectenerg-480	4	21	with	with	ADP
fuelectenerg-480	4	22	a	a	DET
fuelectenerg-480	4	23	piece	piece	NOUN
fuelectenerg-480	4	24	of	of	ADP
fuelectenerg-480	4	25	ferrite	ferrite	NOUN
fuelectenerg-480	4	26	attached	attach	VERB
fuelectenerg-480	4	27	to	to	ADP
fuelectenerg-480	4	28	it	it	PRON
fuelectenerg-480	4	29	.	.	PUNCT
fuelectenerg-480	5	1	with	with	ADP
fuelectenerg-480	5	2	the	the	DET
fuelectenerg-480	5	3	displacement	displacement	NOUN
fuelectenerg-480	5	4	of	of	ADP
fuelectenerg-480	5	5	the	the	DET
fuelectenerg-480	5	6	polyimide	polyimide	ADJ
fuelectenerg-480	5	7	foil	foil	NOUN
fuelectenerg-480	5	8	,	,	PUNCT
fuelectenerg-480	5	9	the	the	DET
fuelectenerg-480	5	10	ferrite	ferrite	NOUN
fuelectenerg-480	5	11	gets	get	VERB
fuelectenerg-480	5	12	closer	close	ADJ
fuelectenerg-480	5	13	to	to	ADP
fuelectenerg-480	5	14	the	the	DET
fuelectenerg-480	5	15	coil	coil	NOUN
fuelectenerg-480	5	16	causing	cause	VERB
fuelectenerg-480	5	17	an	an	DET
fuelectenerg-480	5	18	increase	increase	NOUN
fuelectenerg-480	5	19	in	in	ADP
fuelectenerg-480	5	20	its	its	PRON
fuelectenerg-480	5	21	inductance	inductance	NOUN
fuelectenerg-480	5	22	and	and	CCONJ
fuelectenerg-480	5	23	a	a	DET
fuelectenerg-480	5	24	decrease	decrease	NOUN
fuelectenerg-480	5	25	of	of	ADP
fuelectenerg-480	5	26	the	the	DET
fuelectenerg-480	5	27	resonant	resonant	ADJ
fuelectenerg-480	5	28	frequency	frequency	NOUN
fuelectenerg-480	5	29	of	of	ADP
fuelectenerg-480	5	30	the	the	DET
fuelectenerg-480	5	31	system	system	NOUN
fuelectenerg-480	5	32	(	(	PUNCT
fuelectenerg-480	5	33	coil	coil	NOUN
fuelectenerg-480	5	34	,	,	PUNCT
fuelectenerg-480	5	35	ferrite	ferrite	NOUN
fuelectenerg-480	5	36	and	and	CCONJ
fuelectenerg-480	5	37	antenna	antenna	NOUN
fuelectenerg-480	5	38	)	)	PUNCT
fuelectenerg-480	5	39	.	.	PUNCT
fuelectenerg-480	6	1	simulation	simulation	NOUN
fuelectenerg-480	6	2	results	result	NOUN
fuelectenerg-480	6	3	showed	show	VERB
fuelectenerg-480	6	4	that	that	SCONJ
fuelectenerg-480	6	5	sensors	sensor	NOUN
fuelectenerg-480	6	6	with	with	ADP
fuelectenerg-480	6	7	equal	equal	ADJ
fuelectenerg-480	6	8	outer	outer	ADJ
fuelectenerg-480	6	9	dimensions	dimension	NOUN
fuelectenerg-480	6	10	but	but	CCONJ
fuelectenerg-480	6	11	different	different	ADJ
fuelectenerg-480	6	12	internal	internal	ADJ
fuelectenerg-480	6	13	structures	structure	NOUN
fuelectenerg-480	6	14	exhibit	exhibit	VERB
fuelectenerg-480	6	15	different	different	ADJ
fuelectenerg-480	6	16	performances	performance	NOUN
fuelectenerg-480	6	17	.	.	PUNCT
fuelectenerg-480	7	1	two	two	NUM
fuelectenerg-480	7	2	prototypes	prototype	NOUN
fuelectenerg-480	7	3	of	of	ADP
fuelectenerg-480	7	4	the	the	DET
fuelectenerg-480	7	5	sensor	sensor	NOUN
fuelectenerg-480	7	6	with	with	ADP
fuelectenerg-480	7	7	different	different	ADJ
fuelectenerg-480	7	8	ferrite	ferrite	NOUN
fuelectenerg-480	7	9	dimensions	dimension	NOUN
fuelectenerg-480	7	10	are	be	AUX
fuelectenerg-480	7	11	designed	design	VERB
fuelectenerg-480	7	12	,	,	PUNCT
fuelectenerg-480	7	13	fabricated	fabricate	VERB
fuelectenerg-480	7	14	and	and	CCONJ
fuelectenerg-480	7	15	characterized	characterize	VERB
fuelectenerg-480	7	16	.	.	PUNCT
fuelectenerg-480	8	1	finally	finally	ADV
fuelectenerg-480	8	2	,	,	PUNCT
fuelectenerg-480	8	3	their	their	PRON
fuelectenerg-480	8	4	performances	performance	NOUN
fuelectenerg-480	8	5	are	be	AUX
fuelectenerg-480	8	6	compared	compare	VERB
fuelectenerg-480	8	7	.	.	PUNCT
fuelectenerg-480	9	1	key	key	ADJ
fuelectenerg-480	9	2	words	word	NOUN
fuelectenerg-480	9	3	:	:	PUNCT
fuelectenerg-480	9	4	displacement	displacement	ADJ
fuelectenerg-480	9	5	measurement	measurement	NOUN
fuelectenerg-480	9	6	,	,	PUNCT
fuelectenerg-480	9	7	wireless	wireless	ADJ
fuelectenerg-480	9	8	sensor	sensor	NOUN
fuelectenerg-480	9	9	,	,	PUNCT
fuelectenerg-480	9	10	heterogeneous	heterogeneous	ADJ
fuelectenerg-480	9	11	integration	integration	NOUN
fuelectenerg-480	9	12	1	1	NUM
fuelectenerg-480	9	13	.	.	PUNCT
fuelectenerg-480	10	1	introduction	introduction	NOUN
fuelectenerg-480	10	2	displacement	displacement	NOUN
fuelectenerg-480	10	3	measurement	measurement	NOUN
fuelectenerg-480	10	4	is	be	AUX
fuelectenerg-480	10	5	of	of	ADP
fuelectenerg-480	10	6	a	a	DET
fuelectenerg-480	10	7	profound	profound	ADJ
fuelectenerg-480	10	8	importance	importance	NOUN
fuelectenerg-480	10	9	in	in	ADP
fuelectenerg-480	10	10	a	a	DET
fuelectenerg-480	10	11	wide	wide	ADJ
fuelectenerg-480	10	12	range	range	NOUN
fuelectenerg-480	10	13	of	of	ADP
fuelectenerg-480	10	14	applications	application	NOUN
fuelectenerg-480	10	15	,	,	PUNCT
fuelectenerg-480	10	16	such	such	ADJ
fuelectenerg-480	10	17	as	as	ADP
fuelectenerg-480	10	18	industrial	industrial	ADJ
fuelectenerg-480	10	19	systems	system	NOUN
fuelectenerg-480	10	20	,	,	PUNCT
fuelectenerg-480	10	21	portable	portable	ADJ
fuelectenerg-480	10	22	electronic	electronic	ADJ
fuelectenerg-480	10	23	devices	device	NOUN
fuelectenerg-480	10	24	,	,	PUNCT
fuelectenerg-480	10	25	robots	robot	NOUN
fuelectenerg-480	10	26	,	,	PUNCT
fuelectenerg-480	10	27	biomedical	biomedical	ADJ
fuelectenerg-480	10	28	devices	device	NOUN
fuelectenerg-480	10	29	,	,	PUNCT
fuelectenerg-480	10	30	intelligent	intelligent	ADJ
fuelectenerg-480	10	31	instruments	instrument	NOUN
fuelectenerg-480	10	32	,	,	PUNCT
fuelectenerg-480	10	33	performance	performance	NOUN
fuelectenerg-480	10	34	evaluation	evaluation	NOUN
fuelectenerg-480	10	35	,	,	PUNCT
fuelectenerg-480	10	36	etc	etc	X
fuelectenerg-480	10	37	.	.	X
fuelectenerg-480	11	1	the	the	DET
fuelectenerg-480	11	2	high	high	ADJ
fuelectenerg-480	11	3	demand	demand	NOUN
fuelectenerg-480	11	4	for	for	ADP
fuelectenerg-480	11	5	displacement	displacement	ADJ
fuelectenerg-480	11	6	sensors	sensor	NOUN
fuelectenerg-480	11	7	is	be	AUX
fuelectenerg-480	11	8	due	due	ADJ
fuelectenerg-480	11	9	to	to	ADP
fuelectenerg-480	11	10	their	their	PRON
fuelectenerg-480	11	11	application	application	NOUN
fuelectenerg-480	11	12	for	for	ADP
fuelectenerg-480	11	13	measuring	measure	VERB
fuelectenerg-480	11	14	the	the	DET
fuelectenerg-480	11	15	position	position	NOUN
fuelectenerg-480	11	16	and	and	CCONJ
fuelectenerg-480	11	17	movement	movement	NOUN
fuelectenerg-480	11	18	of	of	ADP
fuelectenerg-480	11	19	objects	object	NOUN
fuelectenerg-480	11	20	,	,	PUNCT
fuelectenerg-480	11	21	for	for	ADP
fuelectenerg-480	11	22	nondestructive	nondestructive	ADJ
fuelectenerg-480	11	23	evaluation	evaluation	NOUN
fuelectenerg-480	11	24	of	of	ADP
fuelectenerg-480	11	25	deformation	deformation	NOUN
fuelectenerg-480	11	26	,	,	PUNCT
fuelectenerg-480	11	27	alignment	alignment	NOUN
fuelectenerg-480	11	28	and	and	CCONJ
fuelectenerg-480	11	29	calibration	calibration	NOUN
fuelectenerg-480	11	30	of	of	ADP
fuelectenerg-480	11	31	position	position	NOUN
fuelectenerg-480	11	32	as	as	ADV
fuelectenerg-480	11	33	well	well	ADV
fuelectenerg-480	11	34	as	as	ADP
fuelectenerg-480	11	35	measuring	measure	VERB
fuelectenerg-480	11	36	other	other	ADJ
fuelectenerg-480	11	37	physical	physical	ADJ
fuelectenerg-480	11	38	quantities	quantity	NOUN
fuelectenerg-480	11	39	which	which	PRON
fuelectenerg-480	11	40	can	can	AUX
fuelectenerg-480	11	41	first	first	ADV
fuelectenerg-480	11	42	be	be	AUX
fuelectenerg-480	11	43	converted	convert	VERB
fuelectenerg-480	11	44	into	into	ADP
fuelectenerg-480	11	45	movement	movement	NOUN
fuelectenerg-480	11	46	such	such	ADJ
fuelectenerg-480	11	47	as	as	ADP
fuelectenerg-480	11	48	pressure	pressure	NOUN
fuelectenerg-480	11	49	,	,	PUNCT
fuelectenerg-480	11	50	force	force	NOUN
fuelectenerg-480	11	51	,	,	PUNCT
fuelectenerg-480	11	52	acceleration	acceleration	NOUN
fuelectenerg-480	11	53	,	,	PUNCT
fuelectenerg-480	11	54	etc	etc	X
fuelectenerg-480	11	55	.	.	X
fuelectenerg-480	11	56	different	different	ADJ
fuelectenerg-480	11	57	types	type	NOUN
fuelectenerg-480	11	58	of	of	ADP
fuelectenerg-480	11	59	displacement	displacement	NOUN
fuelectenerg-480	11	60	measuring	measuring	NOUN
fuelectenerg-480	11	61	methods	method	NOUN
fuelectenerg-480	11	62	and	and	CCONJ
fuelectenerg-480	11	63	sensors	sensor	NOUN
fuelectenerg-480	11	64	have	have	AUX
fuelectenerg-480	11	65	been	be	AUX
fuelectenerg-480	11	66	developed	develop	VERB
fuelectenerg-480	11	67	:	:	PUNCT
fuelectenerg-480	11	68	eddy	eddy	NOUN
fuelectenerg-480	11	69	-	-	PUNCT
fuelectenerg-480	11	70	current	current	ADJ
fuelectenerg-480	11	71	,	,	PUNCT
fuelectenerg-480	11	72	optical	optical	ADJ
fuelectenerg-480	11	73	,	,	PUNCT
fuelectenerg-480	11	74	resistive	resistive	ADJ
fuelectenerg-480	11	75	,	,	PUNCT
fuelectenerg-480	11	76	capacitive	capacitive	ADJ
fuelectenerg-480	11	77	,	,	PUNCT
fuelectenerg-480	11	78	inductive	inductive	ADJ
fuelectenerg-480	11	79	,	,	PUNCT
fuelectenerg-480	11	80	etc	etc	X
fuelectenerg-480	11	81	.	.	X
fuelectenerg-480	12	1	eddy	eddy	PROPN
fuelectenerg-480	12	2	current	current	ADJ
fuelectenerg-480	12	3	sensors	sensor	NOUN
fuelectenerg-480	12	4	are	be	AUX
fuelectenerg-480	12	5	resistant	resistant	ADJ
fuelectenerg-480	12	6	to	to	ADP
fuelectenerg-480	12	7	dirt	dirt	NOUN
fuelectenerg-480	12	8	,	,	PUNCT
fuelectenerg-480	12	9	dust	dust	NOUN
fuelectenerg-480	12	10	,	,	PUNCT
fuelectenerg-480	12	11	humidity	humidity	NOUN
fuelectenerg-480	12	12	,	,	PUNCT
fuelectenerg-480	12	13	oil	oil	NOUN
fuelectenerg-480	12	14	or	or	CCONJ
fuelectenerg-480	12	15	dielectric	dielectric	ADJ
fuelectenerg-480	12	16	material	material	NOUN
fuelectenerg-480	12	17	in	in	ADP
fuelectenerg-480	12	18	the	the	DET
fuelectenerg-480	12	19	measuring	measure	VERB
fuelectenerg-480	12	20	gap	gap	NOUN
fuelectenerg-480	12	21	and	and	CCONJ
fuelectenerg-480	12	22	have	have	AUX
fuelectenerg-480	12	23	been	be	AUX
fuelectenerg-480	12	24	proven	prove	VERB
fuelectenerg-480	12	25	reliable	reliable	ADJ
fuelectenerg-480	12	26	in	in	ADP
fuelectenerg-480	12	27	a	a	DET
fuelectenerg-480	12	28	wide	wide	ADJ
fuelectenerg-480	12	29	range	range	NOUN
fuelectenerg-480	12	30	of	of	ADP
fuelectenerg-480	12	31	temperatures	temperature	NOUN
fuelectenerg-480	12	32	.	.	PUNCT
fuelectenerg-480	13	1	however	however	ADV
fuelectenerg-480	13	2	,	,	PUNCT
fuelectenerg-480	13	3	non	non	ADJ
fuelectenerg-480	13	4	-	-	ADJ
fuelectenerg-480	13	5	contact	contact	ADJ
fuelectenerg-480	13	6	eddy	eddy	PROPN
fuelectenerg-480	13	7	current	current	ADJ
fuelectenerg-480	13	8	sensors	sensor	NOUN
fuelectenerg-480	13	9	have	have	VERB
fuelectenerg-480	13	10	one	one	NUM
fuelectenerg-480	13	11	problem	problem	NOUN
fuelectenerg-480	13	12	,	,	PUNCT
fuelectenerg-480	13	13	inhomogeneity	inhomogeneity	NOUN
fuelectenerg-480	13	14	(	(	PUNCT
fuelectenerg-480	13	15	electrical	electrical	ADJ
fuelectenerg-480	13	16	run	run	VERB
fuelectenerg-480	13	17	out	out	ADP
fuelectenerg-480	13	18	)	)	PUNCT
fuelectenerg-480	13	19	that	that	PRON
fuelectenerg-480	13	20	affects	affect	VERB
fuelectenerg-480	13	21	their	their	PRON
fuelectenerg-480	13	22	accuracy	accuracy	NOUN
fuelectenerg-480	13	23	received	receive	VERB
fuelectenerg-480	13	24	september	september	PROPN
fuelectenerg-480	13	25	18	18	NUM
fuelectenerg-480	13	26	,	,	PUNCT
fuelectenerg-480	13	27	2014	2014	NUM
fuelectenerg-480	13	28	;	;	PUNCT
fuelectenerg-480	13	29	received	receive	VERB
fuelectenerg-480	13	30	in	in	ADP
fuelectenerg-480	13	31	revised	revise	VERB
fuelectenerg-480	13	32	form	form	NOUN
fuelectenerg-480	13	33	january	january	PROPN
fuelectenerg-480	13	34	5	5	NUM
fuelectenerg-480	13	35	,	,	PUNCT
fuelectenerg-480	13	36	2015	2015	NUM
fuelectenerg-480	13	37	corresponding	correspond	VERB
fuelectenerg-480	13	38	author	author	NOUN
fuelectenerg-480	13	39	:	:	PUNCT
fuelectenerg-480	13	40	milica	milica	PROPN
fuelectenerg-480	13	41	g.	g.	PROPN
fuelectenerg-480	13	42	kisić	kisić	PROPN
fuelectenerg-480	13	43	faculty	faculty	PROPN
fuelectenerg-480	13	44	of	of	ADP
fuelectenerg-480	13	45	technical	technical	ADJ
fuelectenerg-480	13	46	sciences	sciences	PROPN
fuelectenerg-480	13	47	,	,	PUNCT
fuelectenerg-480	13	48	university	university	NOUN
fuelectenerg-480	13	49	of	of	ADP
fuelectenerg-480	13	50	novi	novi	PROPN
fuelectenerg-480	13	51	sad	sad	PROPN
fuelectenerg-480	13	52	,	,	PUNCT
fuelectenerg-480	13	53	trg	trg	PROPN
fuelectenerg-480	13	54	dositeja	dositeja	NOUN
fuelectenerg-480	13	55	obradovića	obradovića	PROPN
fuelectenerg-480	13	56	6	6	NUM
fuelectenerg-480	13	57	,	,	PUNCT
fuelectenerg-480	13	58	21000	21000	NUM
fuelectenerg-480	13	59	novi	novi	NOUN
fuelectenerg-480	13	60	sad	sad	PROPN
fuelectenerg-480	13	61	,	,	PUNCT
fuelectenerg-480	13	62	serbia	serbia	PROPN
fuelectenerg-480	13	63	(	(	PUNCT
fuelectenerg-480	13	64	e	e	NOUN
fuelectenerg-480	13	65	-	-	NOUN
fuelectenerg-480	13	66	mail	mail	NOUN
fuelectenerg-480	13	67	:	:	PUNCT
fuelectenerg-480	13	68	mkisic@uns.ac.rs	mkisic@uns.ac.rs	NOUN
fuelectenerg-480	13	69	)	)	PUNCT
fuelectenerg-480	13	70	288	288	NUM
fuelectenerg-480	13	71	m.	m.	NOUN
fuelectenerg-480	13	72	g.	g.	PROPN
fuelectenerg-480	13	73	kisić	kisić	PROPN
fuelectenerg-480	13	74	,	,	PUNCT
fuelectenerg-480	13	75	n.	n.	PROPN
fuelectenerg-480	13	76	v.	v.	ADP
fuelectenerg-480	13	77	blaž	blaž	NOUN
fuelectenerg-480	13	78	,	,	PUNCT
fuelectenerg-480	13	79	k.	k.	PROPN
fuelectenerg-480	13	80	b.	b.	PROPN
fuelectenerg-480	13	81	babković	babković	PROPN
fuelectenerg-480	13	82	,	,	PUNCT
fuelectenerg-480	13	83	et	et	PROPN
fuelectenerg-480	13	84	al	al	PROPN
fuelectenerg-480	13	85	.	.	PROPN
fuelectenerg-480	13	86	and	and	CCONJ
fuelectenerg-480	13	87	applications	application	NOUN
fuelectenerg-480	13	88	[	[	X
fuelectenerg-480	13	89	1	1	NUM
fuelectenerg-480	13	90	]	]	PUNCT
fuelectenerg-480	13	91	.	.	PUNCT
fuelectenerg-480	14	1	optical	optical	ADJ
fuelectenerg-480	14	2	,	,	PUNCT
fuelectenerg-480	14	3	as	as	ADV
fuelectenerg-480	14	4	well	well	ADV
fuelectenerg-480	14	5	as	as	ADP
fuelectenerg-480	14	6	michelsons	michelson	NOUN
fuelectenerg-480	14	7	interferometers	interferometer	NOUN
fuelectenerg-480	14	8	,	,	PUNCT
fuelectenerg-480	14	9	are	be	AUX
fuelectenerg-480	14	10	one	one	NUM
fuelectenerg-480	14	11	of	of	ADP
fuelectenerg-480	14	12	the	the	DET
fuelectenerg-480	14	13	popular	popular	ADJ
fuelectenerg-480	14	14	displacement	displacement	NOUN
fuelectenerg-480	14	15	measurement	measurement	NOUN
fuelectenerg-480	14	16	methods	method	NOUN
fuelectenerg-480	14	17	because	because	SCONJ
fuelectenerg-480	14	18	of	of	ADP
fuelectenerg-480	14	19	their	their	PRON
fuelectenerg-480	14	20	high	high	ADJ
fuelectenerg-480	14	21	precision	precision	NOUN
fuelectenerg-480	14	22	[	[	X
fuelectenerg-480	14	23	2	2	NUM
fuelectenerg-480	14	24	,	,	PUNCT
fuelectenerg-480	14	25	3	3	NUM
fuelectenerg-480	14	26	]	]	PUNCT
fuelectenerg-480	14	27	.	.	PUNCT
fuelectenerg-480	15	1	these	these	DET
fuelectenerg-480	15	2	sensors	sensor	NOUN
fuelectenerg-480	15	3	are	be	AUX
fuelectenerg-480	15	4	very	very	ADV
fuelectenerg-480	15	5	sensitive	sensitive	ADJ
fuelectenerg-480	15	6	to	to	ADP
fuelectenerg-480	15	7	environmental	environmental	ADJ
fuelectenerg-480	15	8	perturbations	perturbation	NOUN
fuelectenerg-480	15	9	and	and	CCONJ
fuelectenerg-480	15	10	suffer	suffer	VERB
fuelectenerg-480	15	11	from	from	ADP
fuelectenerg-480	15	12	deterioration	deterioration	NOUN
fuelectenerg-480	15	13	of	of	ADP
fuelectenerg-480	15	14	signal	signal	NOUN
fuelectenerg-480	15	15	to	to	PART
fuelectenerg-480	15	16	noise	noise	VERB
fuelectenerg-480	15	17	ratio	ratio	NOUN
fuelectenerg-480	15	18	and	and	CCONJ
fuelectenerg-480	15	19	disappearance	disappearance	NOUN
fuelectenerg-480	15	20	of	of	ADP
fuelectenerg-480	15	21	the	the	DET
fuelectenerg-480	15	22	desired	desire	VERB
fuelectenerg-480	15	23	signal	signal	NOUN
fuelectenerg-480	15	24	and	and	CCONJ
fuelectenerg-480	15	25	deviations	deviation	NOUN
fuelectenerg-480	15	26	in	in	ADP
fuelectenerg-480	15	27	the	the	DET
fuelectenerg-480	15	28	optical	optical	ADJ
fuelectenerg-480	15	29	path	path	NOUN
fuelectenerg-480	15	30	length	length	NOUN
fuelectenerg-480	15	31	.	.	PUNCT
fuelectenerg-480	16	1	interferometers	interferometer	NOUN
fuelectenerg-480	16	2	which	which	PRON
fuelectenerg-480	16	3	are	be	AUX
fuelectenerg-480	16	4	based	base	VERB
fuelectenerg-480	16	5	on	on	ADP
fuelectenerg-480	16	6	the	the	DET
fuelectenerg-480	16	7	fringe	fringe	NOUN
fuelectenerg-480	16	8	counting	counting	NOUN
fuelectenerg-480	16	9	method	method	NOUN
fuelectenerg-480	16	10	have	have	VERB
fuelectenerg-480	16	11	high	high	ADJ
fuelectenerg-480	16	12	resolution	resolution	NOUN
fuelectenerg-480	16	13	and	and	CCONJ
fuelectenerg-480	16	14	stability	stability	NOUN
fuelectenerg-480	16	15	,	,	PUNCT
fuelectenerg-480	16	16	but	but	CCONJ
fuelectenerg-480	16	17	their	their	PRON
fuelectenerg-480	16	18	precision	precision	NOUN
fuelectenerg-480	16	19	is	be	AUX
fuelectenerg-480	16	20	dependent	dependent	ADJ
fuelectenerg-480	16	21	on	on	ADP
fuelectenerg-480	16	22	the	the	DET
fuelectenerg-480	16	23	wavelength	wavelength	NOUN
fuelectenerg-480	16	24	of	of	ADP
fuelectenerg-480	16	25	the	the	DET
fuelectenerg-480	16	26	light	light	NOUN
fuelectenerg-480	16	27	[	[	X
fuelectenerg-480	16	28	4	4	NUM
fuelectenerg-480	16	29	]	]	PUNCT
fuelectenerg-480	16	30	.	.	PUNCT
fuelectenerg-480	17	1	they	they	PRON
fuelectenerg-480	17	2	are	be	AUX
fuelectenerg-480	17	3	bulky	bulky	ADJ
fuelectenerg-480	17	4	and	and	CCONJ
fuelectenerg-480	17	5	quite	quite	ADV
fuelectenerg-480	17	6	expensive	expensive	ADJ
fuelectenerg-480	17	7	due	due	ADP
fuelectenerg-480	17	8	to	to	ADP
fuelectenerg-480	17	9	their	their	PRON
fuelectenerg-480	17	10	sophisticated	sophisticated	ADJ
fuelectenerg-480	17	11	structure	structure	NOUN
fuelectenerg-480	17	12	and	and	CCONJ
fuelectenerg-480	17	13	their	their	PRON
fuelectenerg-480	17	14	working	work	VERB
fuelectenerg-480	17	15	performance	performance	NOUN
fuelectenerg-480	17	16	is	be	AUX
fuelectenerg-480	17	17	easily	easily	ADV
fuelectenerg-480	17	18	affected	affect	VERB
fuelectenerg-480	17	19	by	by	ADP
fuelectenerg-480	17	20	the	the	DET
fuelectenerg-480	17	21	environment	environment	NOUN
fuelectenerg-480	17	22	.	.	PUNCT
fuelectenerg-480	18	1	displacement	displacement	ADJ
fuelectenerg-480	18	2	sensors	sensor	NOUN
fuelectenerg-480	18	3	with	with	ADP
fuelectenerg-480	18	4	giant	giant	ADJ
fuelectenerg-480	18	5	magnetoresistance	magnetoresistance	NOUN
fuelectenerg-480	18	6	(	(	PUNCT
fuelectenerg-480	18	7	gmr	gmr	NOUN
fuelectenerg-480	18	8	)	)	PUNCT
fuelectenerg-480	18	9	elements	element	NOUN
fuelectenerg-480	18	10	have	have	VERB
fuelectenerg-480	18	11	their	their	PRON
fuelectenerg-480	18	12	position	position	NOUN
fuelectenerg-480	18	13	resolution	resolution	NOUN
fuelectenerg-480	18	14	limited	limit	VERB
fuelectenerg-480	18	15	by	by	ADP
fuelectenerg-480	18	16	excessively	excessively	ADV
fuelectenerg-480	18	17	low	low	ADJ
fuelectenerg-480	18	18	signal	signal	NOUN
fuelectenerg-480	18	19	to	to	PART
fuelectenerg-480	18	20	noise	noise	VERB
fuelectenerg-480	18	21	ratio	ratio	NOUN
fuelectenerg-480	18	22	[	[	X
fuelectenerg-480	18	23	5	5	NUM
fuelectenerg-480	18	24	]	]	PUNCT
fuelectenerg-480	18	25	.	.	PUNCT
fuelectenerg-480	19	1	capacitive	capacitive	ADJ
fuelectenerg-480	19	2	sensors	sensor	NOUN
fuelectenerg-480	19	3	are	be	AUX
fuelectenerg-480	19	4	the	the	DET
fuelectenerg-480	19	5	best	good	ADJ
fuelectenerg-480	19	6	regarding	regard	VERB
fuelectenerg-480	19	7	accuracy	accuracy	NOUN
fuelectenerg-480	19	8	/	/	SYM
fuelectenerg-480	19	9	resolution	resolution	NOUN
fuelectenerg-480	19	10	and	and	CCONJ
fuelectenerg-480	19	11	the	the	DET
fuelectenerg-480	19	12	applicability	applicability	NOUN
fuelectenerg-480	19	13	for	for	ADP
fuelectenerg-480	19	14	small	small	ADJ
fuelectenerg-480	19	15	targets	target	NOUN
fuelectenerg-480	19	16	.	.	PUNCT
fuelectenerg-480	20	1	they	they	PRON
fuelectenerg-480	20	2	show	show	VERB
fuelectenerg-480	20	3	a	a	DET
fuelectenerg-480	20	4	fringe	fringe	NOUN
fuelectenerg-480	20	5	effect	effect	NOUN
fuelectenerg-480	20	6	around	around	ADP
fuelectenerg-480	20	7	the	the	DET
fuelectenerg-480	20	8	edge	edge	NOUN
fuelectenerg-480	20	9	of	of	ADP
fuelectenerg-480	20	10	the	the	DET
fuelectenerg-480	20	11	patterned	pattern	VERB
fuelectenerg-480	20	12	electrode	electrode	NOUN
fuelectenerg-480	20	13	and	and	CCONJ
fuelectenerg-480	20	14	drift	drift	NOUN
fuelectenerg-480	20	15	in	in	ADP
fuelectenerg-480	20	16	the	the	DET
fuelectenerg-480	20	17	signal	signal	NOUN
fuelectenerg-480	20	18	caused	cause	VERB
fuelectenerg-480	20	19	by	by	ADP
fuelectenerg-480	20	20	various	various	ADJ
fuelectenerg-480	20	21	parameters	parameter	NOUN
fuelectenerg-480	20	22	,	,	PUNCT
fuelectenerg-480	20	23	such	such	ADJ
fuelectenerg-480	20	24	as	as	ADP
fuelectenerg-480	20	25	thermal	thermal	ADJ
fuelectenerg-480	20	26	effect	effect	NOUN
fuelectenerg-480	20	27	,	,	PUNCT
fuelectenerg-480	20	28	stage	stage	NOUN
fuelectenerg-480	20	29	coupling	coupling	NOUN
fuelectenerg-480	20	30	,	,	PUNCT
fuelectenerg-480	20	31	random	random	ADJ
fuelectenerg-480	20	32	wave	wave	NOUN
fuelectenerg-480	20	33	noise	noise	NOUN
fuelectenerg-480	20	34	,	,	PUNCT
fuelectenerg-480	20	35	external	external	ADJ
fuelectenerg-480	20	36	electric	electric	ADJ
fuelectenerg-480	20	37	waves	wave	NOUN
fuelectenerg-480	20	38	,	,	PUNCT
fuelectenerg-480	20	39	etc	etc	X
fuelectenerg-480	20	40	.	.	X
fuelectenerg-480	20	41	which	which	PRON
fuelectenerg-480	20	42	is	be	AUX
fuelectenerg-480	20	43	hard	hard	ADJ
fuelectenerg-480	20	44	to	to	PART
fuelectenerg-480	20	45	control	control	VERB
fuelectenerg-480	20	46	[	[	PUNCT
fuelectenerg-480	20	47	6	6	NUM
fuelectenerg-480	20	48	-	-	SYM
fuelectenerg-480	20	49	9	9	NUM
fuelectenerg-480	20	50	]	]	PUNCT
fuelectenerg-480	20	51	.	.	PUNCT
fuelectenerg-480	21	1	in	in	ADP
fuelectenerg-480	21	2	order	order	NOUN
fuelectenerg-480	21	3	to	to	PART
fuelectenerg-480	21	4	improve	improve	VERB
fuelectenerg-480	21	5	signal	signal	ADJ
fuelectenerg-480	21	6	conditioning	conditioning	NOUN
fuelectenerg-480	21	7	and	and	CCONJ
fuelectenerg-480	21	8	effective	effective	ADJ
fuelectenerg-480	21	9	noise	noise	NOUN
fuelectenerg-480	21	10	reduction	reduction	NOUN
fuelectenerg-480	21	11	for	for	ADP
fuelectenerg-480	21	12	better	well	ADJ
fuelectenerg-480	21	13	accuracy	accuracy	NOUN
fuelectenerg-480	21	14	and	and	CCONJ
fuelectenerg-480	21	15	resolution	resolution	NOUN
fuelectenerg-480	21	16	,	,	PUNCT
fuelectenerg-480	21	17	complex	complex	ADJ
fuelectenerg-480	21	18	electronic	electronic	ADJ
fuelectenerg-480	21	19	circuits	circuit	NOUN
fuelectenerg-480	21	20	are	be	AUX
fuelectenerg-480	21	21	needed	need	VERB
fuelectenerg-480	21	22	[	[	PUNCT
fuelectenerg-480	21	23	10	10	NUM
fuelectenerg-480	21	24	-	-	SYM
fuelectenerg-480	21	25	12	12	NUM
fuelectenerg-480	21	26	]	]	PUNCT
fuelectenerg-480	21	27	.	.	PUNCT
fuelectenerg-480	22	1	inductive	inductive	ADJ
fuelectenerg-480	22	2	displacement	displacement	ADJ
fuelectenerg-480	22	3	sensors	sensor	NOUN
fuelectenerg-480	22	4	with	with	ADP
fuelectenerg-480	22	5	complex	complex	ADJ
fuelectenerg-480	22	6	structures	structure	NOUN
fuelectenerg-480	22	7	of	of	ADP
fuelectenerg-480	22	8	two	two	NUM
fuelectenerg-480	22	9	sensor	sensor	NOUN
fuelectenerg-480	22	10	elements	element	NOUN
fuelectenerg-480	22	11	are	be	AUX
fuelectenerg-480	22	12	presented	present	VERB
fuelectenerg-480	22	13	in	in	ADP
fuelectenerg-480	22	14	[	[	X
fuelectenerg-480	22	15	13	13	NUM
fuelectenerg-480	22	16	]	]	PUNCT
fuelectenerg-480	22	17	.	.	PUNCT
fuelectenerg-480	23	1	piezoresistive	piezoresistive	ADJ
fuelectenerg-480	23	2	sensors	sensor	NOUN
fuelectenerg-480	23	3	are	be	AUX
fuelectenerg-480	23	4	important	important	ADJ
fuelectenerg-480	23	5	and	and	CCONJ
fuelectenerg-480	23	6	widely	widely	ADV
fuelectenerg-480	23	7	utilized	utilize	VERB
fuelectenerg-480	23	8	class	class	NOUN
fuelectenerg-480	23	9	of	of	ADP
fuelectenerg-480	23	10	devices	device	NOUN
fuelectenerg-480	23	11	in	in	ADP
fuelectenerg-480	23	12	mechanical	mechanical	ADJ
fuelectenerg-480	23	13	sensing	sensing	NOUN
fuelectenerg-480	23	14	.	.	PUNCT
fuelectenerg-480	24	1	displacement	displacement	NOUN
fuelectenerg-480	24	2	or	or	CCONJ
fuelectenerg-480	24	3	force	force	VERB
fuelectenerg-480	24	4	sensors	sensor	NOUN
fuelectenerg-480	24	5	with	with	ADP
fuelectenerg-480	24	6	sidewall	sidewall	NOUN
fuelectenerg-480	24	7	embedded	embed	VERB
fuelectenerg-480	24	8	piezoresistors	piezoresistor	NOUN
fuelectenerg-480	24	9	,	,	PUNCT
fuelectenerg-480	24	10	piezoresistive	piezoresistive	ADJ
fuelectenerg-480	24	11	microcantilevers	microcantilever	NOUN
fuelectenerg-480	24	12	and	and	CCONJ
fuelectenerg-480	24	13	self	self	NOUN
fuelectenerg-480	24	14	-	-	PUNCT
fuelectenerg-480	24	15	detection	detection	NOUN
fuelectenerg-480	24	16	onboard	onboard	ADP
fuelectenerg-480	24	17	electronic	electronic	ADJ
fuelectenerg-480	24	18	systems	system	NOUN
fuelectenerg-480	24	19	are	be	AUX
fuelectenerg-480	24	20	designed	design	VERB
fuelectenerg-480	24	21	and	and	CCONJ
fuelectenerg-480	24	22	manufactured	manufacture	VERB
fuelectenerg-480	24	23	[	[	X
fuelectenerg-480	24	24	14	14	NUM
fuelectenerg-480	24	25	,	,	PUNCT
fuelectenerg-480	24	26	15	15	NUM
fuelectenerg-480	24	27	]	]	PUNCT
fuelectenerg-480	24	28	.	.	PUNCT
fuelectenerg-480	25	1	a	a	DET
fuelectenerg-480	25	2	piezoresistive	piezoresistive	ADJ
fuelectenerg-480	25	3	cantilever	cantilever	NOUN
fuelectenerg-480	25	4	based	base	VERB
fuelectenerg-480	25	5	on	on	ADP
fuelectenerg-480	25	6	both	both	CCONJ
fuelectenerg-480	25	7	the	the	DET
fuelectenerg-480	25	8	lateral	lateral	ADJ
fuelectenerg-480	25	9	and	and	CCONJ
fuelectenerg-480	25	10	the	the	DET
fuelectenerg-480	25	11	vertical	vertical	ADJ
fuelectenerg-480	25	12	bending	bending	NOUN
fuelectenerg-480	25	13	for	for	ADP
fuelectenerg-480	25	14	two	two	NUM
fuelectenerg-480	25	15	-	-	PUNCT
fuelectenerg-480	25	16	dimensional	dimensional	ADJ
fuelectenerg-480	25	17	detection	detection	NOUN
fuelectenerg-480	25	18	is	be	AUX
fuelectenerg-480	25	19	presented	present	VERB
fuelectenerg-480	25	20	[	[	X
fuelectenerg-480	25	21	16	16	NUM
fuelectenerg-480	25	22	]	]	PUNCT
fuelectenerg-480	25	23	.	.	PUNCT
fuelectenerg-480	26	1	in	in	ADP
fuelectenerg-480	26	2	[	[	X
fuelectenerg-480	26	3	17	17	NUM
fuelectenerg-480	26	4	]	]	PUNCT
fuelectenerg-480	26	5	is	be	AUX
fuelectenerg-480	26	6	proposed	propose	VERB
fuelectenerg-480	26	7	the	the	DET
fuelectenerg-480	26	8	sensor	sensor	NOUN
fuelectenerg-480	26	9	based	base	VERB
fuelectenerg-480	26	10	on	on	ADP
fuelectenerg-480	26	11	a	a	DET
fuelectenerg-480	26	12	seal	seal	NOUN
fuelectenerg-480	26	13	cavity	cavity	NOUN
fuelectenerg-480	26	14	made	make	VERB
fuelectenerg-480	26	15	by	by	ADP
fuelectenerg-480	26	16	sacrificial	sacrificial	ADJ
fuelectenerg-480	26	17	layer	layer	NOUN
fuelectenerg-480	26	18	,	,	PUNCT
fuelectenerg-480	26	19	a	a	DET
fuelectenerg-480	26	20	deposition	deposition	NOUN
fuelectenerg-480	26	21	of	of	ADP
fuelectenerg-480	26	22	polysilicon	polysilicon	NOUN
fuelectenerg-480	26	23	nanofilm	nanofilm	NOUN
fuelectenerg-480	26	24	acts	act	VERB
fuelectenerg-480	26	25	as	as	ADP
fuelectenerg-480	26	26	piezoresistors	piezoresistor	NOUN
fuelectenerg-480	26	27	on	on	ADP
fuelectenerg-480	26	28	the	the	DET
fuelectenerg-480	26	29	diaphragm	diaphragm	PROPN
fuelectenerg-480	26	30	.	.	PUNCT
fuelectenerg-480	27	1	there	there	PRON
fuelectenerg-480	27	2	is	be	VERB
fuelectenerg-480	27	3	an	an	DET
fuelectenerg-480	27	4	increasingly	increasingly	ADV
fuelectenerg-480	27	5	wide	wide	ADJ
fuelectenerg-480	27	6	interest	interest	NOUN
fuelectenerg-480	27	7	in	in	ADP
fuelectenerg-480	27	8	polymeric	polymeric	ADJ
fuelectenerg-480	27	9	foils	foil	NOUN
fuelectenerg-480	27	10	and	and	CCONJ
fuelectenerg-480	27	11	their	their	PRON
fuelectenerg-480	27	12	application	application	NOUN
fuelectenerg-480	27	13	in	in	ADP
fuelectenerg-480	27	14	the	the	DET
fuelectenerg-480	27	15	field	field	NOUN
fuelectenerg-480	27	16	of	of	ADP
fuelectenerg-480	27	17	sensor	sensor	NOUN
fuelectenerg-480	27	18	technology	technology	NOUN
fuelectenerg-480	27	19	.	.	PUNCT
fuelectenerg-480	28	1	the	the	DET
fuelectenerg-480	28	2	various	various	ADJ
fuelectenerg-480	28	3	types	type	NOUN
fuelectenerg-480	28	4	of	of	ADP
fuelectenerg-480	28	5	sensors	sensor	NOUN
fuelectenerg-480	28	6	applying	apply	VERB
fuelectenerg-480	28	7	polymeric	polymeric	ADJ
fuelectenerg-480	28	8	foils	foil	NOUN
fuelectenerg-480	28	9	can	can	AUX
fuelectenerg-480	28	10	be	be	AUX
fuelectenerg-480	28	11	realized	realize	VERB
fuelectenerg-480	28	12	for	for	ADP
fuelectenerg-480	28	13	different	different	ADJ
fuelectenerg-480	28	14	purposes	purpose	NOUN
fuelectenerg-480	28	15	and	and	CCONJ
fuelectenerg-480	28	16	unique	unique	ADJ
fuelectenerg-480	28	17	possibilities	possibility	NOUN
fuelectenerg-480	28	18	.	.	PUNCT
fuelectenerg-480	29	1	flexible	flexible	ADJ
fuelectenerg-480	29	2	polymeric	polymeric	ADJ
fuelectenerg-480	29	3	foils	foil	NOUN
fuelectenerg-480	29	4	offer	offer	VERB
fuelectenerg-480	29	5	a	a	DET
fuelectenerg-480	29	6	lot	lot	NOUN
fuelectenerg-480	29	7	of	of	ADP
fuelectenerg-480	29	8	advantages	advantage	NOUN
fuelectenerg-480	29	9	in	in	ADP
fuelectenerg-480	29	10	making	make	VERB
fuelectenerg-480	29	11	sensors	sensor	NOUN
fuelectenerg-480	29	12	:	:	PUNCT
fuelectenerg-480	29	13	they	they	PRON
fuelectenerg-480	29	14	are	be	AUX
fuelectenerg-480	29	15	very	very	ADV
fuelectenerg-480	29	16	low	low	ADJ
fuelectenerg-480	29	17	-	-	PUNCT
fuelectenerg-480	29	18	cost	cost	NOUN
fuelectenerg-480	29	19	,	,	PUNCT
fuelectenerg-480	29	20	thin	thin	ADJ
fuelectenerg-480	29	21	,	,	PUNCT
fuelectenerg-480	29	22	large	large	ADJ
fuelectenerg-480	29	23	area	area	NOUN
fuelectenerg-480	29	24	,	,	PUNCT
fuelectenerg-480	29	25	lightweight	lightweight	ADJ
fuelectenerg-480	29	26	,	,	PUNCT
fuelectenerg-480	29	27	flexible	flexible	ADJ
fuelectenerg-480	29	28	,	,	PUNCT
fuelectenerg-480	29	29	conformable	conformable	ADJ
fuelectenerg-480	29	30	,	,	PUNCT
fuelectenerg-480	29	31	transparent	transparent	ADJ
fuelectenerg-480	29	32	,	,	PUNCT
fuelectenerg-480	29	33	wearable	wearable	ADJ
fuelectenerg-480	29	34	,	,	PUNCT
fuelectenerg-480	29	35	foldable	foldable	ADJ
fuelectenerg-480	29	36	,	,	PUNCT
fuelectenerg-480	29	37	stretchable	stretchable	ADJ
fuelectenerg-480	29	38	and	and	CCONJ
fuelectenerg-480	29	39	produced	produce	VERB
fuelectenerg-480	29	40	on	on	ADP
fuelectenerg-480	29	41	a	a	DET
fuelectenerg-480	29	42	large	large	ADJ
fuelectenerg-480	29	43	scale	scale	NOUN
fuelectenerg-480	29	44	.	.	PUNCT
fuelectenerg-480	30	1	polymer	polymer	NOUN
fuelectenerg-480	30	2	substrates	substrate	NOUN
fuelectenerg-480	30	3	are	be	AUX
fuelectenerg-480	30	4	very	very	ADV
fuelectenerg-480	30	5	flexible	flexible	ADJ
fuelectenerg-480	30	6	and	and	CCONJ
fuelectenerg-480	30	7	can	can	AUX
fuelectenerg-480	30	8	be	be	AUX
fuelectenerg-480	30	9	bended	bend	VERB
fuelectenerg-480	30	10	in	in	ADP
fuelectenerg-480	30	11	a	a	DET
fuelectenerg-480	30	12	very	very	ADV
fuelectenerg-480	30	13	small	small	ADJ
fuelectenerg-480	30	14	radius	radius	NOUN
fuelectenerg-480	30	15	of	of	ADP
fuelectenerg-480	30	16	curvature	curvature	NOUN
fuelectenerg-480	30	17	.	.	PUNCT
fuelectenerg-480	31	1	most	most	ADJ
fuelectenerg-480	31	2	previous	previous	ADJ
fuelectenerg-480	31	3	sensors	sensor	NOUN
fuelectenerg-480	31	4	are	be	AUX
fuelectenerg-480	31	5	silicon	silicon	NOUN
fuelectenerg-480	31	6	-	-	PUNCT
fuelectenerg-480	31	7	based	base	VERB
fuelectenerg-480	31	8	which	which	PRON
fuelectenerg-480	31	9	is	be	AUX
fuelectenerg-480	31	10	rigid	rigid	ADJ
fuelectenerg-480	31	11	for	for	ADP
fuelectenerg-480	31	12	flexible	flexible	ADJ
fuelectenerg-480	31	13	,	,	PUNCT
fuelectenerg-480	31	14	bendable	bendable	ADJ
fuelectenerg-480	31	15	applications	application	NOUN
fuelectenerg-480	31	16	and	and	CCONJ
fuelectenerg-480	31	17	to	to	PART
fuelectenerg-480	31	18	cover	cover	VERB
fuelectenerg-480	31	19	continuous	continuous	ADJ
fuelectenerg-480	31	20	,	,	PUNCT
fuelectenerg-480	31	21	contoured	contoured	ADJ
fuelectenerg-480	31	22	,	,	PUNCT
fuelectenerg-480	31	23	conformal	conformal	NOUN
fuelectenerg-480	31	24	surfaces	surface	NOUN
fuelectenerg-480	31	25	.	.	PUNCT
fuelectenerg-480	32	1	in	in	ADP
fuelectenerg-480	32	2	order	order	NOUN
fuelectenerg-480	32	3	to	to	PART
fuelectenerg-480	32	4	achieve	achieve	VERB
fuelectenerg-480	32	5	mechanical	mechanical	ADJ
fuelectenerg-480	32	6	sensors	sensor	NOUN
fuelectenerg-480	32	7	which	which	PRON
fuelectenerg-480	32	8	can	can	AUX
fuelectenerg-480	32	9	fulfill	fulfill	VERB
fuelectenerg-480	32	10	that	that	DET
fuelectenerg-480	32	11	application	application	NOUN
fuelectenerg-480	32	12	and	and	CCONJ
fuelectenerg-480	32	13	can	can	AUX
fuelectenerg-480	32	14	sustain	sustain	VERB
fuelectenerg-480	32	15	sudden	sudden	ADJ
fuelectenerg-480	32	16	impact	impact	NOUN
fuelectenerg-480	32	17	or	or	CCONJ
fuelectenerg-480	32	18	large	large	ADJ
fuelectenerg-480	32	19	deformation	deformation	NOUN
fuelectenerg-480	32	20	,	,	PUNCT
fuelectenerg-480	32	21	flexible	flexible	ADJ
fuelectenerg-480	32	22	substrates	substrate	NOUN
fuelectenerg-480	32	23	can	can	AUX
fuelectenerg-480	32	24	be	be	AUX
fuelectenerg-480	32	25	used	use	VERB
fuelectenerg-480	32	26	.	.	PUNCT
fuelectenerg-480	33	1	in	in	ADP
fuelectenerg-480	33	2	order	order	NOUN
fuelectenerg-480	33	3	to	to	PART
fuelectenerg-480	33	4	develop	develop	VERB
fuelectenerg-480	33	5	strain	strain	ADJ
fuelectenerg-480	33	6	sensors	sensor	NOUN
fuelectenerg-480	33	7	and	and	CCONJ
fuelectenerg-480	33	8	multiplexed	multiplexed	ADJ
fuelectenerg-480	33	9	arrays	array	NOUN
fuelectenerg-480	33	10	with	with	ADP
fuelectenerg-480	33	11	good	good	ADJ
fuelectenerg-480	33	12	performances	performance	NOUN
fuelectenerg-480	33	13	,	,	PUNCT
fuelectenerg-480	33	14	but	but	CCONJ
fuelectenerg-480	33	15	lightweight	lightweight	ADJ
fuelectenerg-480	33	16	construction	construction	NOUN
fuelectenerg-480	33	17	,	,	PUNCT
fuelectenerg-480	33	18	mechanical	mechanical	ADJ
fuelectenerg-480	33	19	flexibility	flexibility	NOUN
fuelectenerg-480	33	20	and	and	CCONJ
fuelectenerg-480	33	21	robustness	robustness	NOUN
fuelectenerg-480	33	22	,	,	PUNCT
fuelectenerg-480	33	23	sensors	sensor	NOUN
fuelectenerg-480	33	24	which	which	PRON
fuelectenerg-480	33	25	combined	combine	VERB
fuelectenerg-480	33	26	silicon	silicon	NOUN
fuelectenerg-480	33	27	sensing	sense	VERB
fuelectenerg-480	33	28	elements	element	NOUN
fuelectenerg-480	33	29	and	and	CCONJ
fuelectenerg-480	33	30	thin	thin	ADJ
fuelectenerg-480	33	31	plastic	plastic	NOUN
fuelectenerg-480	33	32	substrates	substrate	NOUN
fuelectenerg-480	33	33	are	be	AUX
fuelectenerg-480	33	34	developed	develop	VERB
fuelectenerg-480	33	35	[	[	X
fuelectenerg-480	33	36	18	18	NUM
fuelectenerg-480	33	37	]	]	PUNCT
fuelectenerg-480	33	38	.	.	PUNCT
fuelectenerg-480	34	1	different	different	ADJ
fuelectenerg-480	34	2	types	type	NOUN
fuelectenerg-480	34	3	of	of	ADP
fuelectenerg-480	34	4	sensors	sensor	NOUN
fuelectenerg-480	34	5	for	for	ADP
fuelectenerg-480	34	6	mechanical	mechanical	ADJ
fuelectenerg-480	34	7	sensing	sensing	NOUN
fuelectenerg-480	34	8	with	with	ADP
fuelectenerg-480	34	9	flexible	flexible	ADJ
fuelectenerg-480	34	10	substrates	substrate	NOUN
fuelectenerg-480	34	11	of	of	ADP
fuelectenerg-480	34	12	various	various	ADJ
fuelectenerg-480	34	13	polymer	polymer	NOUN
fuelectenerg-480	34	14	-	-	PUNCT
fuelectenerg-480	34	15	based	base	VERB
fuelectenerg-480	34	16	materials	material	NOUN
fuelectenerg-480	34	17	,	,	PUNCT
fuelectenerg-480	34	18	such	such	ADJ
fuelectenerg-480	34	19	as	as	ADP
fuelectenerg-480	34	20	polyester	polyester	NOUN
fuelectenerg-480	34	21	,	,	PUNCT
fuelectenerg-480	34	22	parylene	parylene	NOUN
fuelectenerg-480	34	23	,	,	PUNCT
fuelectenerg-480	34	24	polyimide	polyimide	NOUN
fuelectenerg-480	34	25	(	(	PUNCT
fuelectenerg-480	34	26	pi	pi	NOUN
fuelectenerg-480	34	27	)	)	PUNCT
fuelectenerg-480	34	28	or	or	CCONJ
fuelectenerg-480	34	29	polydimethylsiloxane	polydimethylsiloxane	NOUN
fuelectenerg-480	34	30	(	(	PUNCT
fuelectenerg-480	34	31	pdms	pdms	NOUN
fuelectenerg-480	34	32	)	)	PUNCT
fuelectenerg-480	34	33	were	be	AUX
fuelectenerg-480	34	34	proposed	propose	VERB
fuelectenerg-480	34	35	[	[	PUNCT
fuelectenerg-480	34	36	19	19	NUM
fuelectenerg-480	34	37	-	-	SYM
fuelectenerg-480	34	38	25	25	NUM
fuelectenerg-480	34	39	]	]	PUNCT
fuelectenerg-480	34	40	.	.	PUNCT
fuelectenerg-480	35	1	presented	present	VERB
fuelectenerg-480	35	2	sensors	sensor	NOUN
fuelectenerg-480	35	3	are	be	AUX
fuelectenerg-480	35	4	used	use	VERB
fuelectenerg-480	35	5	for	for	ADP
fuelectenerg-480	35	6	sensing	sense	VERB
fuelectenerg-480	35	7	the	the	DET
fuelectenerg-480	35	8	tactile	tactile	NOUN
fuelectenerg-480	35	9	,	,	PUNCT
fuelectenerg-480	35	10	bending	bending	NOUN
fuelectenerg-480	35	11	,	,	PUNCT
fuelectenerg-480	35	12	interface	interface	NOUN
fuelectenerg-480	35	13	pressure	pressure	NOUN
fuelectenerg-480	35	14	between	between	ADP
fuelectenerg-480	35	15	implanted	implant	VERB
fuelectenerg-480	35	16	cuff	cuff	NOUN
fuelectenerg-480	35	17	and	and	CCONJ
fuelectenerg-480	35	18	nerve	nerve	NOUN
fuelectenerg-480	35	19	tissue	tissue	NOUN
fuelectenerg-480	35	20	,	,	PUNCT
fuelectenerg-480	35	21	normal	normal	ADJ
fuelectenerg-480	35	22	and	and	CCONJ
fuelectenerg-480	35	23	shear	shear	NOUN
fuelectenerg-480	35	24	loads	load	NOUN
fuelectenerg-480	35	25	,	,	PUNCT
fuelectenerg-480	35	26	application	application	NOUN
fuelectenerg-480	35	27	to	to	ADP
fuelectenerg-480	35	28	robotics	robotic	NOUN
fuelectenerg-480	35	29	,	,	PUNCT
fuelectenerg-480	35	30	medicine	medicine	NOUN
fuelectenerg-480	35	31	and	and	CCONJ
fuelectenerg-480	35	32	industry	industry	NOUN
fuelectenerg-480	35	33	.	.	PUNCT
fuelectenerg-480	36	1	an	an	DET
fuelectenerg-480	36	2	overall	overall	ADJ
fuelectenerg-480	36	3	mechanical	mechanical	ADJ
fuelectenerg-480	36	4	flexibility	flexibility	NOUN
fuelectenerg-480	36	5	,	,	PUNCT
fuelectenerg-480	36	6	elasticity	elasticity	NOUN
fuelectenerg-480	36	7	and	and	CCONJ
fuelectenerg-480	36	8	biocompatibility	biocompatibility	NOUN
fuelectenerg-480	36	9	of	of	ADP
fuelectenerg-480	36	10	the	the	DET
fuelectenerg-480	36	11	sensor	sensor	NOUN
fuelectenerg-480	36	12	are	be	AUX
fuelectenerg-480	36	13	obtained	obtain	VERB
fuelectenerg-480	36	14	by	by	ADP
fuelectenerg-480	36	15	integrating	integrate	VERB
fuelectenerg-480	36	16	polymeric	polymeric	ADJ
fuelectenerg-480	36	17	substrates	substrate	NOUN
fuelectenerg-480	36	18	.	.	PUNCT
fuelectenerg-480	37	1	performance	performance	NOUN
fuelectenerg-480	37	2	analysis	analysis	NOUN
fuelectenerg-480	37	3	of	of	ADP
fuelectenerg-480	37	4	a	a	DET
fuelectenerg-480	37	5	flexible	flexible	ADJ
fuelectenerg-480	37	6	polyimide	polyimide	NOUN
fuelectenerg-480	37	7	based	base	VERB
fuelectenerg-480	37	8	device	device	NOUN
fuelectenerg-480	37	9	for	for	ADP
fuelectenerg-480	37	10	displacement	displacement	NOUN
fuelectenerg-480	37	11	sensing	sense	VERB
fuelectenerg-480	37	12	289	289	NUM
fuelectenerg-480	37	13	one	one	NUM
fuelectenerg-480	37	14	of	of	ADP
fuelectenerg-480	37	15	the	the	DET
fuelectenerg-480	37	16	simplest	simple	ADJ
fuelectenerg-480	37	17	sensor	sensor	NOUN
fuelectenerg-480	37	18	structures	structure	NOUN
fuelectenerg-480	37	19	having	have	VERB
fuelectenerg-480	37	20	a	a	DET
fuelectenerg-480	37	21	coil	coil	NOUN
fuelectenerg-480	37	22	and	and	CCONJ
fuelectenerg-480	37	23	a	a	DET
fuelectenerg-480	37	24	ferrite	ferrite	ADJ
fuelectenerg-480	37	25	object	object	NOUN
fuelectenerg-480	37	26	in	in	ADP
fuelectenerg-480	37	27	close	close	ADJ
fuelectenerg-480	37	28	proximity	proximity	NOUN
fuelectenerg-480	37	29	have	have	AUX
fuelectenerg-480	37	30	been	be	AUX
fuelectenerg-480	37	31	reported	report	VERB
fuelectenerg-480	37	32	for	for	ADP
fuelectenerg-480	37	33	monitoring	monitor	VERB
fuelectenerg-480	37	34	changing	change	VERB
fuelectenerg-480	37	35	environmental	environmental	ADJ
fuelectenerg-480	37	36	parameters	parameter	NOUN
fuelectenerg-480	37	37	such	such	ADJ
fuelectenerg-480	37	38	as	as	ADP
fuelectenerg-480	37	39	pressure	pressure	NOUN
fuelectenerg-480	37	40	,	,	PUNCT
fuelectenerg-480	37	41	displacement	displacement	NOUN
fuelectenerg-480	37	42	and	and	CCONJ
fuelectenerg-480	37	43	force	force	NOUN
fuelectenerg-480	37	44	[	[	X
fuelectenerg-480	37	45	26	26	NUM
fuelectenerg-480	37	46	-	-	SYM
fuelectenerg-480	37	47	28	28	NUM
fuelectenerg-480	37	48	]	]	PUNCT
fuelectenerg-480	37	49	.	.	PUNCT
fuelectenerg-480	38	1	in	in	ADP
fuelectenerg-480	38	2	our	our	PRON
fuelectenerg-480	38	3	previous	previous	ADJ
fuelectenerg-480	38	4	paper	paper	NOUN
fuelectenerg-480	38	5	[	[	X
fuelectenerg-480	38	6	29	29	NUM
fuelectenerg-480	38	7	]	]	PUNCT
fuelectenerg-480	38	8	,	,	PUNCT
fuelectenerg-480	38	9	an	an	DET
fuelectenerg-480	38	10	inductive	inductive	ADJ
fuelectenerg-480	38	11	displacement	displacement	ADJ
fuelectenerg-480	38	12	sensor	sensor	NOUN
fuelectenerg-480	38	13	in	in	ADP
fuelectenerg-480	38	14	discrete	discrete	ADJ
fuelectenerg-480	38	15	technology	technology	NOUN
fuelectenerg-480	38	16	was	be	AUX
fuelectenerg-480	38	17	presented	present	VERB
fuelectenerg-480	38	18	.	.	PUNCT
fuelectenerg-480	39	1	traditional	traditional	ADJ
fuelectenerg-480	39	2	fabrication	fabrication	NOUN
fuelectenerg-480	39	3	techniques	technique	NOUN
fuelectenerg-480	39	4	,	,	PUNCT
fuelectenerg-480	39	5	pcb	pcb	NOUN
fuelectenerg-480	39	6	(	(	PUNCT
fuelectenerg-480	39	7	printed	print	VERB
fuelectenerg-480	39	8	circuit	circuit	PROPN
fuelectenerg-480	39	9	board	board	PROPN
fuelectenerg-480	39	10	)	)	PUNCT
fuelectenerg-480	39	11	and	and	CCONJ
fuelectenerg-480	39	12	ltcc	ltcc	ADP
fuelectenerg-480	39	13	(	(	PUNCT
fuelectenerg-480	39	14	low	low	ADJ
fuelectenerg-480	39	15	temperature	temperature	NOUN
fuelectenerg-480	39	16	co	co	ADJ
fuelectenerg-480	39	17	-	-	ADJ
fuelectenerg-480	39	18	fired	fire	VERB
fuelectenerg-480	39	19	technology	technology	NOUN
fuelectenerg-480	39	20	)	)	PUNCT
fuelectenerg-480	39	21	,	,	PUNCT
fuelectenerg-480	39	22	are	be	AUX
fuelectenerg-480	39	23	combined	combine	VERB
fuelectenerg-480	39	24	with	with	ADP
fuelectenerg-480	39	25	a	a	DET
fuelectenerg-480	39	26	polyimide	polyimide	ADJ
fuelectenerg-480	39	27	foil	foil	NOUN
fuelectenerg-480	39	28	to	to	PART
fuelectenerg-480	39	29	create	create	VERB
fuelectenerg-480	39	30	a	a	DET
fuelectenerg-480	39	31	displacement	displacement	ADJ
fuelectenerg-480	39	32	sensing	sense	VERB
fuelectenerg-480	39	33	structure	structure	NOUN
fuelectenerg-480	39	34	.	.	PUNCT
fuelectenerg-480	40	1	presented	present	VERB
fuelectenerg-480	40	2	sensor	sensor	NOUN
fuelectenerg-480	40	3	uses	use	VERB
fuelectenerg-480	40	4	non	non	ADJ
fuelectenerg-480	40	5	-	-	ADJ
fuelectenerg-480	40	6	contact	contact	ADJ
fuelectenerg-480	40	7	wireless	wireless	ADJ
fuelectenerg-480	40	8	displacement	displacement	NOUN
fuelectenerg-480	40	9	measurement	measurement	NOUN
fuelectenerg-480	40	10	so	so	SCONJ
fuelectenerg-480	40	11	it	it	PRON
fuelectenerg-480	40	12	does	do	AUX
fuelectenerg-480	40	13	not	not	PART
fuelectenerg-480	40	14	require	require	VERB
fuelectenerg-480	40	15	proper	proper	ADJ
fuelectenerg-480	40	16	,	,	PUNCT
fuelectenerg-480	40	17	smooth	smooth	ADJ
fuelectenerg-480	40	18	,	,	PUNCT
fuelectenerg-480	40	19	good	good	ADJ
fuelectenerg-480	40	20	contacts	contact	NOUN
fuelectenerg-480	40	21	,	,	PUNCT
fuelectenerg-480	40	22	vias	via	NOUN
fuelectenerg-480	40	23	and	and	CCONJ
fuelectenerg-480	40	24	metal	metal	NOUN
fuelectenerg-480	40	25	lines	line	NOUN
fuelectenerg-480	40	26	on	on	ADP
fuelectenerg-480	40	27	the	the	DET
fuelectenerg-480	40	28	coil	coil	NOUN
fuelectenerg-480	40	29	,	,	PUNCT
fuelectenerg-480	40	30	which	which	PRON
fuelectenerg-480	40	31	can	can	AUX
fuelectenerg-480	40	32	deforms	deform	VERB
fuelectenerg-480	40	33	the	the	DET
fuelectenerg-480	40	34	coil	coil	NOUN
fuelectenerg-480	40	35	structure	structure	NOUN
fuelectenerg-480	40	36	and	and	CCONJ
fuelectenerg-480	40	37	yield	yield	VERB
fuelectenerg-480	40	38	to	to	ADP
fuelectenerg-480	40	39	the	the	DET
fuelectenerg-480	40	40	parasitic	parasitic	ADJ
fuelectenerg-480	40	41	elements	element	NOUN
fuelectenerg-480	40	42	which	which	PRON
fuelectenerg-480	40	43	should	should	AUX
fuelectenerg-480	40	44	be	be	AUX
fuelectenerg-480	40	45	eliminated	eliminate	VERB
fuelectenerg-480	40	46	from	from	ADP
fuelectenerg-480	40	47	the	the	DET
fuelectenerg-480	40	48	actual	actual	ADJ
fuelectenerg-480	40	49	parameters	parameter	NOUN
fuelectenerg-480	40	50	.	.	PUNCT
fuelectenerg-480	41	1	commercially	commercially	ADV
fuelectenerg-480	41	2	available	available	ADJ
fuelectenerg-480	41	3	polyimide	polyimide	NOUN
fuelectenerg-480	41	4	is	be	AUX
fuelectenerg-480	41	5	used	use	VERB
fuelectenerg-480	41	6	as	as	ADP
fuelectenerg-480	41	7	a	a	DET
fuelectenerg-480	41	8	membrane	membrane	NOUN
fuelectenerg-480	41	9	so	so	SCONJ
fuelectenerg-480	41	10	the	the	DET
fuelectenerg-480	41	11	complex	complex	ADJ
fuelectenerg-480	41	12	fabrication	fabrication	NOUN
fuelectenerg-480	41	13	process	process	NOUN
fuelectenerg-480	41	14	that	that	PRON
fuelectenerg-480	41	15	includes	include	VERB
fuelectenerg-480	41	16	photolithography	photolithography	NOUN
fuelectenerg-480	41	17	,	,	PUNCT
fuelectenerg-480	41	18	spinning	spinning	NOUN
fuelectenerg-480	41	19	,	,	PUNCT
fuelectenerg-480	41	20	curing	cure	VERB
fuelectenerg-480	41	21	and	and	CCONJ
fuelectenerg-480	41	22	etching	etch	VERB
fuelectenerg-480	41	23	for	for	ADP
fuelectenerg-480	41	24	membrane	membrane	NOUN
fuelectenerg-480	41	25	fabrication	fabrication	NOUN
fuelectenerg-480	41	26	is	be	AUX
fuelectenerg-480	41	27	avoided	avoid	VERB
fuelectenerg-480	41	28	.	.	PUNCT
fuelectenerg-480	42	1	the	the	DET
fuelectenerg-480	42	2	sensor	sensor	NOUN
fuelectenerg-480	42	3	utilizes	utilize	VERB
fuelectenerg-480	42	4	the	the	DET
fuelectenerg-480	42	5	variation	variation	NOUN
fuelectenerg-480	42	6	of	of	ADP
fuelectenerg-480	42	7	the	the	DET
fuelectenerg-480	42	8	coil	coil	NOUN
fuelectenerg-480	42	9	’s	’s	PART
fuelectenerg-480	42	10	inductance	inductance	NOUN
fuelectenerg-480	42	11	and	and	CCONJ
fuelectenerg-480	42	12	accordingly	accordingly	ADV
fuelectenerg-480	42	13	the	the	DET
fuelectenerg-480	42	14	shift	shift	NOUN
fuelectenerg-480	42	15	of	of	ADP
fuelectenerg-480	42	16	the	the	DET
fuelectenerg-480	42	17	resonant	resonant	ADJ
fuelectenerg-480	42	18	frequency	frequency	NOUN
fuelectenerg-480	42	19	of	of	ADP
fuelectenerg-480	42	20	the	the	DET
fuelectenerg-480	42	21	antenna	antenna	NOUN
fuelectenerg-480	42	22	-	-	PUNCT
fuelectenerg-480	42	23	sensor	sensor	NOUN
fuelectenerg-480	42	24	system	system	NOUN
fuelectenerg-480	42	25	to	to	PART
fuelectenerg-480	42	26	detect	detect	VERB
fuelectenerg-480	42	27	the	the	DET
fuelectenerg-480	42	28	desired	desire	VERB
fuelectenerg-480	42	29	parameter	parameter	NOUN
fuelectenerg-480	42	30	displacement	displacement	NOUN
fuelectenerg-480	42	31	.	.	PUNCT
fuelectenerg-480	43	1	in	in	ADP
fuelectenerg-480	43	2	this	this	DET
fuelectenerg-480	43	3	work	work	NOUN
fuelectenerg-480	43	4	,	,	PUNCT
fuelectenerg-480	43	5	two	two	NUM
fuelectenerg-480	43	6	variations	variation	NOUN
fuelectenerg-480	43	7	of	of	ADP
fuelectenerg-480	43	8	the	the	DET
fuelectenerg-480	43	9	sensor	sensor	NOUN
fuelectenerg-480	43	10	with	with	ADP
fuelectenerg-480	43	11	different	different	ADJ
fuelectenerg-480	43	12	ferrite	ferrite	NOUN
fuelectenerg-480	43	13	dimensions	dimension	NOUN
fuelectenerg-480	43	14	are	be	AUX
fuelectenerg-480	43	15	designed	design	VERB
fuelectenerg-480	43	16	and	and	CCONJ
fuelectenerg-480	43	17	examined	examine	VERB
fuelectenerg-480	43	18	,	,	PUNCT
fuelectenerg-480	43	19	in	in	ADP
fuelectenerg-480	43	20	order	order	NOUN
fuelectenerg-480	43	21	to	to	PART
fuelectenerg-480	43	22	investigate	investigate	VERB
fuelectenerg-480	43	23	their	their	PRON
fuelectenerg-480	43	24	performance	performance	NOUN
fuelectenerg-480	43	25	.	.	PUNCT
fuelectenerg-480	44	1	such	such	ADJ
fuelectenerg-480	44	2	wireless	wireless	ADJ
fuelectenerg-480	44	3	displacement	displacement	NOUN
fuelectenerg-480	44	4	sensors	sensor	NOUN
fuelectenerg-480	44	5	applying	apply	VERB
fuelectenerg-480	44	6	the	the	DET
fuelectenerg-480	44	7	heterogeneous	heterogeneous	ADJ
fuelectenerg-480	44	8	integration	integration	NOUN
fuelectenerg-480	44	9	process	process	NOUN
fuelectenerg-480	44	10	are	be	AUX
fuelectenerg-480	44	11	fabricated	fabricate	VERB
fuelectenerg-480	44	12	and	and	CCONJ
fuelectenerg-480	44	13	tested	test	VERB
fuelectenerg-480	44	14	.	.	PUNCT
fuelectenerg-480	45	1	finally	finally	ADV
fuelectenerg-480	45	2	,	,	PUNCT
fuelectenerg-480	45	3	their	their	PRON
fuelectenerg-480	45	4	performances	performance	NOUN
fuelectenerg-480	45	5	are	be	AUX
fuelectenerg-480	45	6	compared	compare	VERB
fuelectenerg-480	45	7	.	.	PUNCT
fuelectenerg-480	46	1	2	2	X
fuelectenerg-480	46	2	.	.	X
fuelectenerg-480	46	3	design	design	NOUN
fuelectenerg-480	46	4	of	of	ADP
fuelectenerg-480	46	5	displacement	displacement	ADJ
fuelectenerg-480	46	6	sensor	sensor	NOUN
fuelectenerg-480	46	7	with	with	ADP
fuelectenerg-480	46	8	polyimide	polyimide	ADJ
fuelectenerg-480	46	9	membrane	membrane	NOUN
fuelectenerg-480	46	10	the	the	DET
fuelectenerg-480	46	11	integrated	integrate	VERB
fuelectenerg-480	46	12	displacement	displacement	ADJ
fuelectenerg-480	46	13	sensor	sensor	NOUN
fuelectenerg-480	46	14	consists	consist	VERB
fuelectenerg-480	46	15	of	of	ADP
fuelectenerg-480	46	16	a	a	DET
fuelectenerg-480	46	17	coil	coil	NOUN
fuelectenerg-480	46	18	,	,	PUNCT
fuelectenerg-480	46	19	a	a	DET
fuelectenerg-480	46	20	small	small	ADJ
fuelectenerg-480	46	21	cylindrical	cylindrical	ADJ
fuelectenerg-480	46	22	ferrite	ferrite	NOUN
fuelectenerg-480	46	23	plate	plate	NOUN
fuelectenerg-480	46	24	,	,	PUNCT
fuelectenerg-480	46	25	a	a	DET
fuelectenerg-480	46	26	suitable	suitable	ADJ
fuelectenerg-480	46	27	spacer	spacer	NOUN
fuelectenerg-480	46	28	and	and	CCONJ
fuelectenerg-480	46	29	finally	finally	ADV
fuelectenerg-480	46	30	a	a	DET
fuelectenerg-480	46	31	flexible	flexible	ADJ
fuelectenerg-480	46	32	membrane	membrane	NOUN
fuelectenerg-480	46	33	.	.	PUNCT
fuelectenerg-480	47	1	the	the	DET
fuelectenerg-480	47	2	exploded	exploded	ADJ
fuelectenerg-480	47	3	3d	3d	NUM
fuelectenerg-480	47	4	view	view	NOUN
fuelectenerg-480	47	5	of	of	ADP
fuelectenerg-480	47	6	the	the	DET
fuelectenerg-480	47	7	sensor	sensor	NOUN
fuelectenerg-480	47	8	and	and	CCONJ
fuelectenerg-480	47	9	its	its	PRON
fuelectenerg-480	47	10	cross	cross	NOUN
fuelectenerg-480	47	11	section	section	NOUN
fuelectenerg-480	47	12	and	and	CCONJ
fuelectenerg-480	47	13	an	an	DET
fuelectenerg-480	47	14	antenna	antenna	NOUN
fuelectenerg-480	47	15	coil	coil	NOUN
fuelectenerg-480	47	16	are	be	AUX
fuelectenerg-480	47	17	presented	present	VERB
fuelectenerg-480	47	18	in	in	ADP
fuelectenerg-480	47	19	fig	fig	NOUN
fuelectenerg-480	47	20	.	.	PUNCT
fuelectenerg-480	48	1	1	1	X
fuelectenerg-480	48	2	.	.	X
fuelectenerg-480	48	3	the	the	DET
fuelectenerg-480	48	4	manufacturing	manufacturing	NOUN
fuelectenerg-480	48	5	process	process	NOUN
fuelectenerg-480	48	6	of	of	ADP
fuelectenerg-480	48	7	the	the	DET
fuelectenerg-480	48	8	sensor	sensor	NOUN
fuelectenerg-480	48	9	consists	consist	VERB
fuelectenerg-480	48	10	of	of	ADP
fuelectenerg-480	48	11	two	two	NUM
fuelectenerg-480	48	12	stages	stage	NOUN
fuelectenerg-480	48	13	,	,	PUNCT
fuelectenerg-480	48	14	the	the	DET
fuelectenerg-480	48	15	fabrication	fabrication	NOUN
fuelectenerg-480	48	16	of	of	ADP
fuelectenerg-480	48	17	the	the	DET
fuelectenerg-480	48	18	components	component	NOUN
fuelectenerg-480	48	19	and	and	CCONJ
fuelectenerg-480	48	20	the	the	DET
fuelectenerg-480	48	21	packing	packing	NOUN
fuelectenerg-480	48	22	process	process	NOUN
fuelectenerg-480	48	23	.	.	PUNCT
fuelectenerg-480	49	1	pcb	pcb	NOUN
fuelectenerg-480	49	2	technology	technology	NOUN
fuelectenerg-480	49	3	is	be	AUX
fuelectenerg-480	49	4	used	use	VERB
fuelectenerg-480	49	5	for	for	ADP
fuelectenerg-480	49	6	the	the	DET
fuelectenerg-480	49	7	coil	coil	NOUN
fuelectenerg-480	49	8	fabrication	fabrication	NOUN
fuelectenerg-480	49	9	because	because	SCONJ
fuelectenerg-480	49	10	pcb	pcb	NOUN
fuelectenerg-480	49	11	circuits	circuit	NOUN
fuelectenerg-480	49	12	are	be	AUX
fuelectenerg-480	49	13	planar	planar	ADJ
fuelectenerg-480	49	14	,	,	PUNCT
fuelectenerg-480	49	15	easy	easy	ADJ
fuelectenerg-480	49	16	to	to	PART
fuelectenerg-480	49	17	mount	mount	VERB
fuelectenerg-480	49	18	,	,	PUNCT
fuelectenerg-480	49	19	reliable	reliable	ADJ
fuelectenerg-480	49	20	and	and	CCONJ
fuelectenerg-480	49	21	cheap	cheap	ADJ
fuelectenerg-480	49	22	.	.	PUNCT
fuelectenerg-480	50	1	the	the	DET
fuelectenerg-480	50	2	coil	coil	NOUN
fuelectenerg-480	50	3	is	be	AUX
fuelectenerg-480	50	4	designed	design	VERB
fuelectenerg-480	50	5	as	as	ADP
fuelectenerg-480	50	6	a	a	DET
fuelectenerg-480	50	7	square	square	ADJ
fuelectenerg-480	50	8	spiral	spiral	ADJ
fuelectenerg-480	50	9	type	type	NOUN
fuelectenerg-480	50	10	with	with	ADP
fuelectenerg-480	50	11	outer	outer	ADJ
fuelectenerg-480	50	12	dimensions	dimension	NOUN
fuelectenerg-480	50	13	of	of	ADP
fuelectenerg-480	50	14	19	19	NUM
fuelectenerg-480	50	15	mm	mm	NOUN
fuelectenerg-480	50	16	,	,	PUNCT
fuelectenerg-480	50	17	25	25	NUM
fuelectenerg-480	50	18	turns	turn	NOUN
fuelectenerg-480	50	19	,	,	PUNCT
fuelectenerg-480	50	20	and	and	CCONJ
fuelectenerg-480	50	21	conductive	conductive	ADJ
fuelectenerg-480	50	22	lines	line	NOUN
fuelectenerg-480	50	23	width	width	VERB
fuelectenerg-480	50	24	and	and	CCONJ
fuelectenerg-480	50	25	distance	distance	NOUN
fuelectenerg-480	50	26	between	between	ADP
fuelectenerg-480	50	27	the	the	DET
fuelectenerg-480	50	28	lines	line	NOUN
fuelectenerg-480	50	29	both	both	CCONJ
fuelectenerg-480	50	30	equal	equal	ADJ
fuelectenerg-480	50	31	to	to	ADP
fuelectenerg-480	50	32	150	150	NUM
fuelectenerg-480	50	33	µm	µm	NOUN
fuelectenerg-480	50	34	.	.	PUNCT
fuelectenerg-480	51	1	as	as	ADP
fuelectenerg-480	51	2	the	the	DET
fuelectenerg-480	51	3	membrane	membrane	NOUN
fuelectenerg-480	51	4	,	,	PUNCT
fuelectenerg-480	51	5	a	a	DET
fuelectenerg-480	51	6	polyimide	polyimide	ADJ
fuelectenerg-480	51	7	foil	foil	NOUN
fuelectenerg-480	51	8	of	of	ADP
fuelectenerg-480	51	9	125	125	NUM
fuelectenerg-480	51	10	µm	µm	ADP
fuelectenerg-480	51	11	thickness	thickness	NOUN
fuelectenerg-480	51	12	and	and	CCONJ
fuelectenerg-480	51	13	young	young	ADJ
fuelectenerg-480	51	14	’s	’s	PART
fuelectenerg-480	51	15	modulus	modulus	NOUN
fuelectenerg-480	51	16	of	of	ADP
fuelectenerg-480	51	17	3	3	NUM
fuelectenerg-480	51	18	gpa	gpa	PROPN
fuelectenerg-480	51	19	[	[	X
fuelectenerg-480	51	20	30	30	NUM
fuelectenerg-480	51	21	]	]	PUNCT
fuelectenerg-480	51	22	is	be	AUX
fuelectenerg-480	51	23	used	use	VERB
fuelectenerg-480	51	24	.	.	PUNCT
fuelectenerg-480	52	1	polyimide	polyimide	ADJ
fuelectenerg-480	52	2	substrate	substrate	NOUN
fuelectenerg-480	52	3	shows	show	VERB
fuelectenerg-480	52	4	elastic	elastic	ADJ
fuelectenerg-480	52	5	-	-	PUNCT
fuelectenerg-480	52	6	plastic	plastic	NOUN
fuelectenerg-480	52	7	behavior	behavior	NOUN
fuelectenerg-480	52	8	and	and	CCONJ
fuelectenerg-480	52	9	tends	tend	VERB
fuelectenerg-480	52	10	to	to	PART
fuelectenerg-480	52	11	creep	creep	VERB
fuelectenerg-480	52	12	so	so	ADV
fuelectenerg-480	52	13	may	may	AUX
fuelectenerg-480	52	14	exhibit	exhibit	VERB
fuelectenerg-480	52	15	parametric	parametric	ADJ
fuelectenerg-480	52	16	drift	drift	NOUN
fuelectenerg-480	52	17	,	,	PUNCT
fuelectenerg-480	52	18	but	but	CCONJ
fuelectenerg-480	52	19	it	it	PRON
fuelectenerg-480	52	20	can	can	AUX
fuelectenerg-480	52	21	take	take	VERB
fuelectenerg-480	52	22	large	large	ADJ
fuelectenerg-480	52	23	strains	strain	NOUN
fuelectenerg-480	52	24	before	before	ADP
fuelectenerg-480	52	25	fracture	fracture	NOUN
fuelectenerg-480	52	26	and	and	CCONJ
fuelectenerg-480	52	27	has	have	VERB
fuelectenerg-480	52	28	an	an	DET
fuelectenerg-480	52	29	elastic	elastic	ADJ
fuelectenerg-480	52	30	modulus	modulus	NOUN
fuelectenerg-480	52	31	smaller	small	ADJ
fuelectenerg-480	52	32	by	by	ADP
fuelectenerg-480	52	33	nearly	nearly	ADV
fuelectenerg-480	52	34	a	a	PRON
fuelectenerg-480	52	35	factor	factor	NOUN
fuelectenerg-480	52	36	of	of	ADP
fuelectenerg-480	52	37	70	70	NUM
fuelectenerg-480	52	38	compared	compare	VERB
fuelectenerg-480	52	39	with	with	ADP
fuelectenerg-480	52	40	the	the	DET
fuelectenerg-480	52	41	silicon	silicon	NOUN
fuelectenerg-480	52	42	and	and	CCONJ
fuelectenerg-480	52	43	the	the	DET
fuelectenerg-480	52	44	metal	metal	NOUN
fuelectenerg-480	52	45	foils	foil	NOUN
fuelectenerg-480	52	46	[	[	X
fuelectenerg-480	52	47	31	31	NUM
fuelectenerg-480	52	48	,	,	PUNCT
fuelectenerg-480	52	49	32	32	NUM
fuelectenerg-480	52	50	]	]	PUNCT
fuelectenerg-480	52	51	.	.	PUNCT
fuelectenerg-480	53	1	for	for	ADP
fuelectenerg-480	53	2	used	use	VERB
fuelectenerg-480	53	3	polyimide	polyimide	NOUN
fuelectenerg-480	53	4	foil	foil	NOUN
fuelectenerg-480	53	5	,	,	PUNCT
fuelectenerg-480	53	6	considerable	considerable	ADJ
fuelectenerg-480	53	7	smaller	small	ADJ
fuelectenerg-480	53	8	load	load	NOUN
fuelectenerg-480	53	9	is	be	AUX
fuelectenerg-480	53	10	needed	need	VERB
fuelectenerg-480	53	11	for	for	ADP
fuelectenerg-480	53	12	the	the	DET
fuelectenerg-480	53	13	same	same	ADJ
fuelectenerg-480	53	14	deflection	deflection	NOUN
fuelectenerg-480	53	15	compared	compare	VERB
fuelectenerg-480	53	16	with	with	ADP
fuelectenerg-480	53	17	other	other	ADJ
fuelectenerg-480	53	18	membranes	membrane	NOUN
fuelectenerg-480	53	19	.	.	PUNCT
fuelectenerg-480	54	1	the	the	DET
fuelectenerg-480	54	2	ferrite	ferrite	ADJ
fuelectenerg-480	54	3	disk	disk	NOUN
fuelectenerg-480	54	4	consists	consist	NOUN
fuelectenerg-480	54	5	of	of	ADP
fuelectenerg-480	54	6	12	12	NUM
fuelectenerg-480	54	7	layers	layer	NOUN
fuelectenerg-480	54	8	of	of	ADP
fuelectenerg-480	54	9	ltcc	ltcc	ADJ
fuelectenerg-480	54	10	ferrite	ferrite	NOUN
fuelectenerg-480	54	11	tape	tape	NOUN
fuelectenerg-480	54	12	(	(	PUNCT
fuelectenerg-480	54	13	esl	esl	PROPN
fuelectenerg-480	54	14	40012	40012	NUM
fuelectenerg-480	54	15	,	,	PUNCT
fuelectenerg-480	54	16	thickness	thickness	NOUN
fuelectenerg-480	54	17	of	of	ADP
fuelectenerg-480	54	18	green	green	ADJ
fuelectenerg-480	54	19	tape	tape	NOUN
fuelectenerg-480	54	20	:	:	PUNCT
fuelectenerg-480	54	21	~70	~70	PUNCT
fuelectenerg-480	54	22	µm	µm	NOUN
fuelectenerg-480	54	23	)	)	PUNCT
fuelectenerg-480	54	24	sintered	sinter	VERB
fuelectenerg-480	54	25	at	at	ADP
fuelectenerg-480	54	26	1100	1100	NUM
fuelectenerg-480	54	27	°	°	ADP
fuelectenerg-480	54	28	c	c	NOUN
fuelectenerg-480	54	29	in	in	ADP
fuelectenerg-480	54	30	order	order	NOUN
fuelectenerg-480	54	31	to	to	PART
fuelectenerg-480	54	32	achieve	achieve	VERB
fuelectenerg-480	54	33	the	the	DET
fuelectenerg-480	54	34	highest	high	ADJ
fuelectenerg-480	54	35	permeability	permeability	NOUN
fuelectenerg-480	54	36	[	[	X
fuelectenerg-480	54	37	33	33	NUM
fuelectenerg-480	54	38	]	]	PUNCT
fuelectenerg-480	54	39	.	.	PUNCT
fuelectenerg-480	55	1	the	the	DET
fuelectenerg-480	55	2	thickness	thickness	NOUN
fuelectenerg-480	55	3	of	of	ADP
fuelectenerg-480	55	4	the	the	DET
fuelectenerg-480	55	5	ferrite	ferrite	NOUN
fuelectenerg-480	55	6	disk	disk	NOUN
fuelectenerg-480	55	7	after	after	ADP
fuelectenerg-480	55	8	sintering	sinter	VERB
fuelectenerg-480	55	9	is	be	AUX
fuelectenerg-480	55	10	0.66	0.66	NUM
fuelectenerg-480	55	11	mm	mm	NOUN
fuelectenerg-480	55	12	.	.	PUNCT
fuelectenerg-480	56	1	several	several	ADJ
fuelectenerg-480	56	2	pcb	pcb	NOUN
fuelectenerg-480	56	3	fr4	fr4	PROPN
fuelectenerg-480	56	4	plates	plate	NOUN
fuelectenerg-480	56	5	of	of	ADP
fuelectenerg-480	56	6	different	different	ADJ
fuelectenerg-480	56	7	types	type	NOUN
fuelectenerg-480	56	8	and	and	CCONJ
fuelectenerg-480	56	9	thicknesses	thickness	NOUN
fuelectenerg-480	56	10	(	(	PUNCT
fuelectenerg-480	56	11	with	with	ADP
fuelectenerg-480	56	12	overall	overall	ADJ
fuelectenerg-480	56	13	thickness	thickness	NOUN
fuelectenerg-480	56	14	of	of	ADP
fuelectenerg-480	56	15	2.6	2.6	NUM
fuelectenerg-480	56	16	mm	mm	NOUN
fuelectenerg-480	56	17	and	and	CCONJ
fuelectenerg-480	56	18	a	a	DET
fuelectenerg-480	56	19	milled	mill	VERB
fuelectenerg-480	56	20	hole	hole	NOUN
fuelectenerg-480	56	21	of	of	ADP
fuelectenerg-480	56	22	a	a	DET
fuelectenerg-480	56	23	16	16	NUM
fuelectenerg-480	56	24	mm	mm	NOUN
fuelectenerg-480	56	25	radius	radius	NOUN
fuelectenerg-480	56	26	in	in	ADP
fuelectenerg-480	56	27	the	the	DET
fuelectenerg-480	56	28	center	center	NOUN
fuelectenerg-480	56	29	)	)	PUNCT
fuelectenerg-480	56	30	are	be	AUX
fuelectenerg-480	56	31	used	use	VERB
fuelectenerg-480	56	32	as	as	ADP
fuelectenerg-480	56	33	a	a	DET
fuelectenerg-480	56	34	spacer	spacer	NOUN
fuelectenerg-480	56	35	,	,	PUNCT
fuelectenerg-480	56	36	in	in	ADP
fuelectenerg-480	56	37	order	order	NOUN
fuelectenerg-480	56	38	to	to	PART
fuelectenerg-480	56	39	provide	provide	VERB
fuelectenerg-480	56	40	spacing	spacing	NOUN
fuelectenerg-480	56	41	of	of	ADP
fuelectenerg-480	56	42	1.2	1.2	NUM
fuelectenerg-480	56	43	mm	mm	NOUN
fuelectenerg-480	56	44	between	between	ADP
fuelectenerg-480	56	45	the	the	DET
fuelectenerg-480	56	46	ferrite	ferrite	NOUN
fuelectenerg-480	56	47	and	and	CCONJ
fuelectenerg-480	56	48	the	the	DET
fuelectenerg-480	56	49	coil	coil	NOUN
fuelectenerg-480	56	50	(	(	PUNCT
fuelectenerg-480	56	51	since	since	SCONJ
fuelectenerg-480	56	52	the	the	DET
fuelectenerg-480	56	53	thickness	thickness	NOUN
fuelectenerg-480	56	54	of	of	ADP
fuelectenerg-480	56	55	the	the	DET
fuelectenerg-480	56	56	membrane	membrane	NOUN
fuelectenerg-480	56	57	,	,	PUNCT
fuelectenerg-480	56	58	the	the	DET
fuelectenerg-480	56	59	ferrite	ferrite	NOUN
fuelectenerg-480	56	60	and	and	CCONJ
fuelectenerg-480	56	61	the	the	DET
fuelectenerg-480	56	62	glue	glue	NOUN
fuelectenerg-480	56	63	is	be	AUX
fuelectenerg-480	56	64	1.4	1.4	NUM
fuelectenerg-480	56	65	mm	mm	NOUN
fuelectenerg-480	56	66	)	)	PUNCT
fuelectenerg-480	56	67	.	.	PUNCT
fuelectenerg-480	57	1	290	290	NUM
fuelectenerg-480	57	2	m.	m.	NOUN
fuelectenerg-480	57	3	g.	g.	PROPN
fuelectenerg-480	57	4	kisić	kisić	PROPN
fuelectenerg-480	57	5	,	,	PUNCT
fuelectenerg-480	57	6	n.	n.	PROPN
fuelectenerg-480	57	7	v.	v.	ADP
fuelectenerg-480	57	8	blaž	blaž	NOUN
fuelectenerg-480	57	9	,	,	PUNCT
fuelectenerg-480	57	10	k.	k.	PROPN
fuelectenerg-480	57	11	b.	b.	PROPN
fuelectenerg-480	57	12	babković	babković	PROPN
fuelectenerg-480	57	13	,	,	PUNCT
fuelectenerg-480	57	14	et	et	PROPN
fuelectenerg-480	57	15	al	al	PROPN
fuelectenerg-480	57	16	.	.	PUNCT
fuelectenerg-480	58	1	a	a	DET
fuelectenerg-480	58	2	)	)	PUNCT
fuelectenerg-480	58	3	b	b	NOUN
fuelectenerg-480	58	4	)	)	PUNCT
fuelectenerg-480	58	5	fig	fig	NOUN
fuelectenerg-480	58	6	.	.	PUNCT
fuelectenerg-480	59	1	1	1	NUM
fuelectenerg-480	59	2	a	a	PRON
fuelectenerg-480	59	3	)	)	PUNCT
fuelectenerg-480	59	4	exploded	explode	VERB
fuelectenerg-480	59	5	3d	3d	NUM
fuelectenerg-480	59	6	view	view	NOUN
fuelectenerg-480	59	7	of	of	ADP
fuelectenerg-480	59	8	the	the	DET
fuelectenerg-480	59	9	sensor	sensor	NOUN
fuelectenerg-480	59	10	and	and	CCONJ
fuelectenerg-480	59	11	b	b	NOUN
fuelectenerg-480	59	12	)	)	PUNCT
fuelectenerg-480	59	13	cross	cross	NOUN
fuelectenerg-480	59	14	section	section	NOUN
fuelectenerg-480	59	15	of	of	ADP
fuelectenerg-480	59	16	the	the	DET
fuelectenerg-480	59	17	sensor	sensor	NOUN
fuelectenerg-480	59	18	and	and	CCONJ
fuelectenerg-480	59	19	the	the	DET
fuelectenerg-480	59	20	antenna	antenna	NOUN
fuelectenerg-480	59	21	coil	coil	NOUN
fuelectenerg-480	59	22	3	3	X
fuelectenerg-480	59	23	.	.	PUNCT
fuelectenerg-480	59	24	calculation	calculation	NOUN
fuelectenerg-480	59	25	of	of	ADP
fuelectenerg-480	59	26	a	a	DET
fuelectenerg-480	59	27	sensing	sense	VERB
fuelectenerg-480	59	28	mechanism	mechanism	NOUN
fuelectenerg-480	59	29	the	the	DET
fuelectenerg-480	59	30	resonant	resonant	ADJ
fuelectenerg-480	59	31	frequency	frequency	NOUN
fuelectenerg-480	59	32	of	of	ADP
fuelectenerg-480	59	33	the	the	DET
fuelectenerg-480	59	34	coil	coil	NOUN
fuelectenerg-480	59	35	can	can	AUX
fuelectenerg-480	59	36	be	be	AUX
fuelectenerg-480	59	37	expressed	express	VERB
fuelectenerg-480	59	38	as	as	ADP
fuelectenerg-480	59	39	sscl	sscl	PROPN
fuelectenerg-480	59	40	f	f	PROPN
fuelectenerg-480	59	41	2	2	PROPN
fuelectenerg-480	59	42	1	1	NUM
fuelectenerg-480	59	43	0	0	NUM
fuelectenerg-480	59	44			NUM
fuelectenerg-480	59	45	,	,	PUNCT
fuelectenerg-480	59	46	(	(	PUNCT
fuelectenerg-480	59	47	1	1	X
fuelectenerg-480	59	48	)	)	PUNCT
fuelectenerg-480	59	49	where	where	SCONJ
fuelectenerg-480	59	50	ls	ls	ADJ
fuelectenerg-480	59	51	and	and	CCONJ
fuelectenerg-480	59	52	cs	cs	PROPN
fuelectenerg-480	59	53	are	be	AUX
fuelectenerg-480	59	54	the	the	DET
fuelectenerg-480	59	55	inductance	inductance	NOUN
fuelectenerg-480	59	56	and	and	CCONJ
fuelectenerg-480	59	57	capacitance	capacitance	NOUN
fuelectenerg-480	59	58	of	of	ADP
fuelectenerg-480	59	59	the	the	DET
fuelectenerg-480	59	60	sensor	sensor	NOUN
fuelectenerg-480	59	61	coil	coil	NOUN
fuelectenerg-480	59	62	,	,	PUNCT
fuelectenerg-480	59	63	respectively	respectively	ADV
fuelectenerg-480	59	64	.	.	PUNCT
fuelectenerg-480	60	1	it	it	PRON
fuelectenerg-480	60	2	can	can	AUX
fuelectenerg-480	60	3	be	be	AUX
fuelectenerg-480	60	4	seen	see	VERB
fuelectenerg-480	60	5	that	that	SCONJ
fuelectenerg-480	60	6	any	any	DET
fuelectenerg-480	60	7	variation	variation	NOUN
fuelectenerg-480	60	8	in	in	ADP
fuelectenerg-480	60	9	the	the	DET
fuelectenerg-480	60	10	coil	coil	NOUN
fuelectenerg-480	60	11	inductance	inductance	NOUN
fuelectenerg-480	60	12	changes	change	VERB
fuelectenerg-480	60	13	the	the	DET
fuelectenerg-480	60	14	resonant	resonant	ADJ
fuelectenerg-480	60	15	frequency	frequency	NOUN
fuelectenerg-480	60	16	.	.	PUNCT
fuelectenerg-480	61	1	displacement	displacement	NOUN
fuelectenerg-480	61	2	can	can	AUX
fuelectenerg-480	61	3	be	be	AUX
fuelectenerg-480	61	4	detected	detect	VERB
fuelectenerg-480	61	5	in	in	ADP
fuelectenerg-480	61	6	a	a	DET
fuelectenerg-480	61	7	simple	simple	ADJ
fuelectenerg-480	61	8	and	and	CCONJ
fuelectenerg-480	61	9	precise	precise	ADJ
fuelectenerg-480	61	10	way	way	NOUN
fuelectenerg-480	61	11	without	without	ADP
fuelectenerg-480	61	12	additional	additional	ADJ
fuelectenerg-480	61	13	mechanical	mechanical	ADJ
fuelectenerg-480	61	14	contact	contact	NOUN
fuelectenerg-480	61	15	on	on	ADP
fuelectenerg-480	61	16	the	the	DET
fuelectenerg-480	61	17	sensor	sensor	NOUN
fuelectenerg-480	61	18	.	.	PUNCT
fuelectenerg-480	62	1	wireless	wireless	ADJ
fuelectenerg-480	62	2	measurements	measurement	NOUN
fuelectenerg-480	62	3	of	of	ADP
fuelectenerg-480	62	4	the	the	DET
fuelectenerg-480	62	5	sensor	sensor	NOUN
fuelectenerg-480	62	6	regard	regard	VERB
fuelectenerg-480	62	7	the	the	DET
fuelectenerg-480	62	8	readout	readout	NOUN
fuelectenerg-480	62	9	of	of	ADP
fuelectenerg-480	62	10	the	the	DET
fuelectenerg-480	62	11	changes	change	NOUN
fuelectenerg-480	62	12	of	of	ADP
fuelectenerg-480	62	13	the	the	DET
fuelectenerg-480	62	14	resonant	resonant	ADJ
fuelectenerg-480	62	15	frequency	frequency	NOUN
fuelectenerg-480	62	16	of	of	ADP
fuelectenerg-480	62	17	the	the	DET
fuelectenerg-480	62	18	sensor	sensor	NOUN
fuelectenerg-480	62	19	-	-	PUNCT
fuelectenerg-480	62	20	antenna	antenna	NOUN
fuelectenerg-480	62	21	system	system	NOUN
fuelectenerg-480	62	22	.	.	PUNCT
fuelectenerg-480	63	1	measurements	measurement	NOUN
fuelectenerg-480	63	2	are	be	AUX
fuelectenerg-480	63	3	done	do	VERB
fuelectenerg-480	63	4	using	use	VERB
fuelectenerg-480	63	5	an	an	DET
fuelectenerg-480	63	6	external	external	ADJ
fuelectenerg-480	63	7	surrounding	surround	VERB
fuelectenerg-480	63	8	coil	coil	NOUN
fuelectenerg-480	63	9	–	–	PUNCT
fuelectenerg-480	63	10	antenna	antenna	NOUN
fuelectenerg-480	63	11	.	.	PUNCT
fuelectenerg-480	64	1	the	the	DET
fuelectenerg-480	64	2	equivalent	equivalent	ADJ
fuelectenerg-480	64	3	circuit	circuit	NOUN
fuelectenerg-480	64	4	model	model	NOUN
fuelectenerg-480	64	5	of	of	ADP
fuelectenerg-480	64	6	the	the	DET
fuelectenerg-480	64	7	sensor	sensor	NOUN
fuelectenerg-480	64	8	-	-	PUNCT
fuelectenerg-480	64	9	antenna	antenna	NOUN
fuelectenerg-480	64	10	system	system	NOUN
fuelectenerg-480	64	11	is	be	AUX
fuelectenerg-480	64	12	presented	present	VERB
fuelectenerg-480	64	13	in	in	ADP
fuelectenerg-480	64	14	fig	fig	NOUN
fuelectenerg-480	64	15	.	.	PUNCT
fuelectenerg-480	65	1	2	2	X
fuelectenerg-480	65	2	.	.	X
fuelectenerg-480	65	3	the	the	DET
fuelectenerg-480	65	4	impedance	impedance	NOUN
fuelectenerg-480	65	5	of	of	ADP
fuelectenerg-480	65	6	the	the	DET
fuelectenerg-480	65	7	sensor	sensor	NOUN
fuelectenerg-480	65	8	-	-	PUNCT
fuelectenerg-480	65	9	antenna	antenna	NOUN
fuelectenerg-480	65	10	system	system	NOUN
fuelectenerg-480	65	11	can	can	AUX
fuelectenerg-480	65	12	be	be	AUX
fuelectenerg-480	65	13	determined	determine	VERB
fuelectenerg-480	65	14	as	as	ADP
fuelectenerg-480	65	15	[	[	X
fuelectenerg-480	65	16	34	34	NUM
fuelectenerg-480	65	17	]	]	PUNCT
fuelectenerg-480	65	18	performance	performance	NOUN
fuelectenerg-480	65	19	analysis	analysis	NOUN
fuelectenerg-480	65	20	of	of	ADP
fuelectenerg-480	65	21	a	a	DET
fuelectenerg-480	65	22	flexible	flexible	ADJ
fuelectenerg-480	65	23	polyimide	polyimide	NOUN
fuelectenerg-480	65	24	based	base	VERB
fuelectenerg-480	65	25	device	device	NOUN
fuelectenerg-480	65	26	for	for	ADP
fuelectenerg-480	65	27	displacement	displacement	NOUN
fuelectenerg-480	65	28	sensing	sense	VERB
fuelectenerg-480	65	29	291	291	NUM
fuelectenerg-480	65	30	2	2	NUM
fuelectenerg-480	65	31	(	(	PUNCT
fuelectenerg-480	65	32	)	)	PUNCT
fuelectenerg-480	65	33	(	(	PUNCT
fuelectenerg-480	65	34	)	)	PUNCT
fuelectenerg-480	65	35	1	1	NUM
fuelectenerg-480	65	36	a	a	DET
fuelectenerg-480	65	37	a	a	DET
fuelectenerg-480	65	38	s	s	X
fuelectenerg-480	65	39	s	s	X
fuelectenerg-480	65	40	s	s	NOUN
fuelectenerg-480	65	41	m	m	NOUN
fuelectenerg-480	65	42	z	z	NOUN
fuelectenerg-480	65	43	r	r	NOUN
fuelectenerg-480	66	1	j	j	NOUN
fuelectenerg-480	66	2	l	l	NOUN
fuelectenerg-480	66	3	r	r	NOUN
fuelectenerg-480	66	4	j	j	PROPN
fuelectenerg-480	66	5	l	l	NOUN
fuelectenerg-480	66	6	c	c	NOUN
fuelectenerg-480	67	1			X
fuelectenerg-480	67	2			X
fuelectenerg-480	67	3			X
fuelectenerg-480	67	4			X
fuelectenerg-480	67	5			PROPN
fuelectenerg-480	67	6			PROPN
fuelectenerg-480	67	7			ADV
fuelectenerg-480	67	8			VERB
fuelectenerg-480	67	9			NOUN
fuelectenerg-480	67	10			PROPN
fuelectenerg-480	67	11			PROPN
fuelectenerg-480	67	12			PROPN
fuelectenerg-480	67	13			PROPN
fuelectenerg-480	67	14			ADJ
fuelectenerg-480	67	15			NOUN
fuelectenerg-480	67	16	,	,	PUNCT
fuelectenerg-480	67	17	(	(	PUNCT
fuelectenerg-480	67	18	2	2	X
fuelectenerg-480	67	19	)	)	PUNCT
fuelectenerg-480	67	20	where	where	SCONJ
fuelectenerg-480	67	21	la	la	PROPN
fuelectenerg-480	67	22	and	and	CCONJ
fuelectenerg-480	67	23	ra	ra	PROPN
fuelectenerg-480	67	24	represent	represent	VERB
fuelectenerg-480	67	25	the	the	DET
fuelectenerg-480	67	26	inductance	inductance	NOUN
fuelectenerg-480	67	27	and	and	CCONJ
fuelectenerg-480	67	28	resistance	resistance	NOUN
fuelectenerg-480	67	29	of	of	ADP
fuelectenerg-480	67	30	the	the	DET
fuelectenerg-480	67	31	antenna	antenna	NOUN
fuelectenerg-480	67	32	,	,	PUNCT
fuelectenerg-480	67	33	respectively	respectively	ADV
fuelectenerg-480	67	34	,	,	PUNCT
fuelectenerg-480	67	35	rs	rs	X
fuelectenerg-480	67	36	is	be	AUX
fuelectenerg-480	67	37	resistance	resistance	NOUN
fuelectenerg-480	67	38	of	of	ADP
fuelectenerg-480	67	39	the	the	DET
fuelectenerg-480	67	40	sensor	sensor	NOUN
fuelectenerg-480	67	41	coil	coil	NOUN
fuelectenerg-480	67	42	,	,	PUNCT
fuelectenerg-480	67	43	and	and	CCONJ
fuelectenerg-480	67	44	m	m	PROPN
fuelectenerg-480	67	45	is	be	AUX
fuelectenerg-480	67	46	the	the	DET
fuelectenerg-480	67	47	mutual	mutual	ADJ
fuelectenerg-480	67	48	inductance	inductance	NOUN
fuelectenerg-480	67	49	between	between	ADP
fuelectenerg-480	67	50	the	the	DET
fuelectenerg-480	67	51	antenna	antenna	NOUN
fuelectenerg-480	67	52	coil	coil	NOUN
fuelectenerg-480	67	53	and	and	CCONJ
fuelectenerg-480	67	54	the	the	DET
fuelectenerg-480	67	55	sensor	sensor	NOUN
fuelectenerg-480	67	56	coil	coil	NOUN
fuelectenerg-480	67	57	.	.	PUNCT
fuelectenerg-480	68	1	the	the	DET
fuelectenerg-480	68	2	magnitude	magnitude	NOUN
fuelectenerg-480	68	3	of	of	ADP
fuelectenerg-480	68	4	the	the	DET
fuelectenerg-480	68	5	impedance	impedance	NOUN
fuelectenerg-480	68	6	’s	’s	PART
fuelectenerg-480	68	7	phase	phase	NOUN
fuelectenerg-480	68	8	dip	dip	NOUN
fuelectenerg-480	68	9	at	at	ADP
fuelectenerg-480	68	10	the	the	DET
fuelectenerg-480	68	11	resonant	resonant	ADJ
fuelectenerg-480	68	12	frequency	frequency	NOUN
fuelectenerg-480	68	13	0	0	NOUN
fuelectenerg-480	68	14	is	be	AUX
fuelectenerg-480	68	15			PROPN
fuelectenerg-480	68	16			PROPN
fuelectenerg-480	68	17			NOUN
fuelectenerg-480	68	18			PROPN
fuelectenerg-480	68	19			PROPN
fuelectenerg-480	68	20			PROPN
fuelectenerg-480	68	21			PROPN
fuelectenerg-480	68	22			NOUN
fuelectenerg-480	68	23			PROPN
fuelectenerg-480	68	24			PROPN
fuelectenerg-480	68	25	s	s	NOUN
fuelectenerg-480	68	26	s	s	NOUN
fuelectenerg-480	68	27	r	r	NOUN
fuelectenerg-480	68	28	lk	lk	NOUN
fuelectenerg-480	68	29	0	0	NUM
fuelectenerg-480	68	30	2	2	NUM
fuelectenerg-480	68	31	1tan	1tan	NUM
fuelectenerg-480	68	32			PROPN
fuelectenerg-480	68	33			PROPN
fuelectenerg-480	68	34	,	,	PUNCT
fuelectenerg-480	68	35	(	(	PUNCT
fuelectenerg-480	68	36	3	3	X
fuelectenerg-480	68	37	)	)	PUNCT
fuelectenerg-480	68	38	where	where	SCONJ
fuelectenerg-480	68	39	k	k	PROPN
fuelectenerg-480	68	40	is	be	AUX
fuelectenerg-480	68	41	the	the	DET
fuelectenerg-480	68	42	coupling	coupling	NOUN
fuelectenerg-480	68	43	coefficient	coefficient	NOUN
fuelectenerg-480	68	44	of	of	ADP
fuelectenerg-480	68	45	the	the	DET
fuelectenerg-480	68	46	antenna	antenna	NOUN
fuelectenerg-480	68	47	coil	coil	NOUN
fuelectenerg-480	68	48	and	and	CCONJ
fuelectenerg-480	68	49	the	the	DET
fuelectenerg-480	68	50	sensor	sensor	NOUN
fuelectenerg-480	68	51	coil	coil	NOUN
fuelectenerg-480	68	52	.	.	PUNCT
fuelectenerg-480	69	1	using	use	VERB
fuelectenerg-480	69	2	wheeler	wheeler	NOUN
fuelectenerg-480	69	3	’s	’s	PART
fuelectenerg-480	69	4	method	method	NOUN
fuelectenerg-480	69	5	[	[	X
fuelectenerg-480	69	6	35	35	NUM
fuelectenerg-480	69	7	]	]	PUNCT
fuelectenerg-480	69	8	,	,	PUNCT
fuelectenerg-480	69	9	the	the	DET
fuelectenerg-480	69	10	inductance	inductance	NOUN
fuelectenerg-480	69	11	of	of	ADP
fuelectenerg-480	69	12	the	the	DET
fuelectenerg-480	69	13	sensor	sensor	NOUN
fuelectenerg-480	69	14	coil	coil	NOUN
fuelectenerg-480	69	15	is	be	AUX
fuelectenerg-480	69	16	calculated	calculate	VERB
fuelectenerg-480	69	17	,	,	PUNCT
fuelectenerg-480	69	18	ls	ls	ADJ
fuelectenerg-480	69	19	=	=	NOUN
fuelectenerg-480	69	20	7.8	7.8	NUM
fuelectenerg-480	69	21	μh	μh	NUM
fuelectenerg-480	69	22	.	.	PUNCT
fuelectenerg-480	70	1	a	a	DET
fuelectenerg-480	70	2	planar	planar	ADJ
fuelectenerg-480	70	3	magnetic	magnetic	ADJ
fuelectenerg-480	70	4	structure	structure	NOUN
fuelectenerg-480	70	5	in	in	ADP
fuelectenerg-480	70	6	close	close	ADJ
fuelectenerg-480	70	7	proximity	proximity	NOUN
fuelectenerg-480	70	8	to	to	ADP
fuelectenerg-480	70	9	the	the	DET
fuelectenerg-480	70	10	coil	coil	NOUN
fuelectenerg-480	70	11	yields	yield	VERB
fuelectenerg-480	70	12	high	high	ADJ
fuelectenerg-480	70	13	enhancement	enhancement	NOUN
fuelectenerg-480	70	14	of	of	ADP
fuelectenerg-480	70	15	the	the	DET
fuelectenerg-480	70	16	inductance	inductance	NOUN
fuelectenerg-480	70	17	values	value	NOUN
fuelectenerg-480	70	18	.	.	PUNCT
fuelectenerg-480	71	1	in	in	ADP
fuelectenerg-480	71	2	order	order	NOUN
fuelectenerg-480	71	3	to	to	PART
fuelectenerg-480	71	4	investigate	investigate	VERB
fuelectenerg-480	71	5	in	in	ADP
fuelectenerg-480	71	6	which	which	PRON
fuelectenerg-480	71	7	manner	manner	NOUN
fuelectenerg-480	71	8	dimensions	dimension	NOUN
fuelectenerg-480	71	9	of	of	ADP
fuelectenerg-480	71	10	the	the	DET
fuelectenerg-480	71	11	ferrite	ferrite	ADJ
fuelectenerg-480	71	12	influence	influence	NOUN
fuelectenerg-480	71	13	the	the	DET
fuelectenerg-480	71	14	sensor	sensor	NOUN
fuelectenerg-480	71	15	coil	coil	NOUN
fuelectenerg-480	71	16	inductance	inductance	NOUN
fuelectenerg-480	71	17	,	,	PUNCT
fuelectenerg-480	71	18	simulations	simulation	NOUN
fuelectenerg-480	71	19	of	of	ADP
fuelectenerg-480	71	20	the	the	DET
fuelectenerg-480	71	21	inductance	inductance	NOUN
fuelectenerg-480	71	22	for	for	ADP
fuelectenerg-480	71	23	different	different	ADJ
fuelectenerg-480	71	24	ferrite	ferrite	ADJ
fuelectenerg-480	71	25	dimensions	dimension	NOUN
fuelectenerg-480	71	26	and	and	CCONJ
fuelectenerg-480	71	27	distances	distance	NOUN
fuelectenerg-480	71	28	from	from	ADP
fuelectenerg-480	71	29	the	the	DET
fuelectenerg-480	71	30	coil	coil	NOUN
fuelectenerg-480	71	31	are	be	AUX
fuelectenerg-480	71	32	performed	perform	VERB
fuelectenerg-480	71	33	using	use	VERB
fuelectenerg-480	71	34	cst	cst	PROPN
fuelectenerg-480	71	35	(	(	PUNCT
fuelectenerg-480	71	36	computer	computer	NOUN
fuelectenerg-480	71	37	simulation	simulation	NOUN
fuelectenerg-480	71	38	technology	technology	NOUN
fuelectenerg-480	71	39	)	)	PUNCT
fuelectenerg-480	71	40	microwave	microwave	NOUN
fuelectenerg-480	71	41	studio	studio	NOUN
fuelectenerg-480	71	42	[	[	X
fuelectenerg-480	71	43	36	36	NUM
fuelectenerg-480	71	44	]	]	PUNCT
fuelectenerg-480	71	45	.	.	PUNCT
fuelectenerg-480	72	1	the	the	DET
fuelectenerg-480	72	2	simulated	simulated	ADJ
fuelectenerg-480	72	3	inductance	inductance	NOUN
fuelectenerg-480	72	4	of	of	ADP
fuelectenerg-480	72	5	the	the	DET
fuelectenerg-480	72	6	coil	coil	NOUN
fuelectenerg-480	72	7	for	for	ADP
fuelectenerg-480	72	8	different	different	ADJ
fuelectenerg-480	72	9	ferrite	ferrite	NOUN
fuelectenerg-480	72	10	radii	radius	NOUN
fuelectenerg-480	72	11	(	(	PUNCT
fuelectenerg-480	72	12	r	r	NOUN
fuelectenerg-480	72	13	=	=	SYM
fuelectenerg-480	72	14	6	6	NUM
fuelectenerg-480	72	15	mm	mm	NOUN
fuelectenerg-480	72	16	and	and	CCONJ
fuelectenerg-480	72	17	r	r	NOUN
fuelectenerg-480	72	18	=	=	SYM
fuelectenerg-480	72	19	9.5	9.5	NUM
fuelectenerg-480	72	20	mm	mm	NOUN
fuelectenerg-480	72	21	)	)	PUNCT
fuelectenerg-480	72	22	and	and	CCONJ
fuelectenerg-480	72	23	distances	distance	NOUN
fuelectenerg-480	72	24	between	between	ADP
fuelectenerg-480	72	25	the	the	DET
fuelectenerg-480	72	26	ferrite	ferrite	NOUN
fuelectenerg-480	72	27	and	and	CCONJ
fuelectenerg-480	72	28	the	the	DET
fuelectenerg-480	72	29	coil	coil	NOUN
fuelectenerg-480	72	30	,	,	PUNCT
fuelectenerg-480	72	31	d	d	NOUN
fuelectenerg-480	72	32	,	,	PUNCT
fuelectenerg-480	72	33	is	be	AUX
fuelectenerg-480	72	34	presented	present	VERB
fuelectenerg-480	72	35	in	in	ADP
fuelectenerg-480	72	36	fig	fig	NOUN
fuelectenerg-480	72	37	.	.	PUNCT
fuelectenerg-480	73	1	3	3	X
fuelectenerg-480	73	2	.	.	X
fuelectenerg-480	73	3	as	as	SCONJ
fuelectenerg-480	73	4	can	can	AUX
fuelectenerg-480	73	5	be	be	AUX
fuelectenerg-480	73	6	seen	see	VERB
fuelectenerg-480	73	7	,	,	PUNCT
fuelectenerg-480	73	8	a	a	DET
fuelectenerg-480	73	9	larger	large	ADJ
fuelectenerg-480	73	10	ferrite	ferrite	NOUN
fuelectenerg-480	73	11	yields	yield	NOUN
fuelectenerg-480	73	12	higher	high	ADJ
fuelectenerg-480	73	13	inductance	inductance	NOUN
fuelectenerg-480	73	14	value	value	NOUN
fuelectenerg-480	73	15	and	and	CCONJ
fuelectenerg-480	73	16	higher	high	ADJ
fuelectenerg-480	73	17	inductance	inductance	NOUN
fuelectenerg-480	73	18	change	change	NOUN
fuelectenerg-480	73	19	rate	rate	NOUN
fuelectenerg-480	73	20	with	with	ADP
fuelectenerg-480	73	21	distance	distance	NOUN
fuelectenerg-480	73	22	(	(	PUNCT
fuelectenerg-480	73	23	2.07	2.07	NUM
fuelectenerg-480	73	24	µh	µh	NOUN
fuelectenerg-480	73	25	)	)	PUNCT
fuelectenerg-480	73	26	compared	compare	VERB
fuelectenerg-480	73	27	to	to	ADP
fuelectenerg-480	73	28	the	the	DET
fuelectenerg-480	73	29	smaller	small	ADJ
fuelectenerg-480	73	30	ferrite	ferrite	NOUN
fuelectenerg-480	73	31	(	(	PUNCT
fuelectenerg-480	73	32	0.66	0.66	NUM
fuelectenerg-480	73	33	µh	µh	NOUN
fuelectenerg-480	73	34	)	)	PUNCT
fuelectenerg-480	73	35	as	as	ADP
fuelectenerg-480	73	36	the	the	DET
fuelectenerg-480	73	37	consequence	consequence	NOUN
fuelectenerg-480	73	38	of	of	ADP
fuelectenerg-480	73	39	greater	great	ADJ
fuelectenerg-480	73	40	intersects	intersect	NOUN
fuelectenerg-480	73	41	of	of	ADP
fuelectenerg-480	73	42	the	the	DET
fuelectenerg-480	73	43	magnetic	magnetic	ADJ
fuelectenerg-480	73	44	field	field	NOUN
fuelectenerg-480	73	45	between	between	ADP
fuelectenerg-480	73	46	the	the	DET
fuelectenerg-480	73	47	coil	coil	NOUN
fuelectenerg-480	73	48	and	and	CCONJ
fuelectenerg-480	73	49	the	the	DET
fuelectenerg-480	73	50	ferrite	ferrite	NOUN
fuelectenerg-480	73	51	.	.	PUNCT
fuelectenerg-480	74	1	fig	fig	NOUN
fuelectenerg-480	74	2	.	.	PUNCT
fuelectenerg-480	75	1	3	3	NUM
fuelectenerg-480	75	2	simulated	simulate	VERB
fuelectenerg-480	75	3	inductance	inductance	NOUN
fuelectenerg-480	75	4	changes	change	NOUN
fuelectenerg-480	75	5	for	for	ADP
fuelectenerg-480	75	6	different	different	ADJ
fuelectenerg-480	75	7	ferrite	ferrite	NOUN
fuelectenerg-480	75	8	radii	radius	NOUN
fuelectenerg-480	75	9	and	and	CCONJ
fuelectenerg-480	75	10	distances	distance	NOUN
fuelectenerg-480	75	11	between	between	ADP
fuelectenerg-480	75	12	the	the	DET
fuelectenerg-480	75	13	ferrite	ferrite	NOUN
fuelectenerg-480	75	14	and	and	CCONJ
fuelectenerg-480	75	15	the	the	DET
fuelectenerg-480	75	16	coil	coil	NOUN
fuelectenerg-480	75	17	fig	fig	NOUN
fuelectenerg-480	75	18	.	.	PUNCT
fuelectenerg-480	76	1	2	2	NUM
fuelectenerg-480	77	1	the	the	DET
fuelectenerg-480	77	2	equivalent	equivalent	ADJ
fuelectenerg-480	77	3	circuit	circuit	NOUN
fuelectenerg-480	77	4	model	model	NOUN
fuelectenerg-480	77	5	of	of	ADP
fuelectenerg-480	77	6	the	the	DET
fuelectenerg-480	77	7	sensor	sensor	NOUN
fuelectenerg-480	77	8	-	-	PUNCT
fuelectenerg-480	77	9	antenna	antenna	NOUN
fuelectenerg-480	77	10	system	system	NOUN
fuelectenerg-480	77	11	292	292	NUM
fuelectenerg-480	77	12	m.	m.	NOUN
fuelectenerg-480	77	13	g.	g.	PROPN
fuelectenerg-480	77	14	kisić	kisić	PROPN
fuelectenerg-480	77	15	,	,	PUNCT
fuelectenerg-480	77	16	n.	n.	PROPN
fuelectenerg-480	77	17	v.	v.	ADP
fuelectenerg-480	77	18	blaž	blaž	NOUN
fuelectenerg-480	77	19	,	,	PUNCT
fuelectenerg-480	77	20	k.	k.	PROPN
fuelectenerg-480	77	21	b.	b.	PROPN
fuelectenerg-480	77	22	babković	babković	PROPN
fuelectenerg-480	77	23	,	,	PUNCT
fuelectenerg-480	77	24	et	et	PROPN
fuelectenerg-480	77	25	al	al	PROPN
fuelectenerg-480	77	26	.	.	PROPN
fuelectenerg-480	77	27	4	4	NUM
fuelectenerg-480	77	28	.	.	X
fuelectenerg-480	77	29	experimental	experimental	ADJ
fuelectenerg-480	77	30	results	result	NOUN
fuelectenerg-480	77	31	and	and	CCONJ
fuelectenerg-480	77	32	discussion	discussion	NOUN
fuelectenerg-480	77	33	the	the	DET
fuelectenerg-480	77	34	measurement	measurement	NOUN
fuelectenerg-480	77	35	setup	setup	NOUN
fuelectenerg-480	77	36	is	be	AUX
fuelectenerg-480	77	37	shown	show	VERB
fuelectenerg-480	77	38	in	in	ADP
fuelectenerg-480	77	39	fig	fig	NOUN
fuelectenerg-480	77	40	.	.	PUNCT
fuelectenerg-480	78	1	4	4	X
fuelectenerg-480	78	2	.	.	X
fuelectenerg-480	78	3	the	the	DET
fuelectenerg-480	78	4	fabricated	fabricate	VERB
fuelectenerg-480	78	5	sensor	sensor	NOUN
fuelectenerg-480	78	6	is	be	AUX
fuelectenerg-480	78	7	mounted	mount	VERB
fuelectenerg-480	78	8	and	and	CCONJ
fuelectenerg-480	78	9	sealed	seal	VERB
fuelectenerg-480	78	10	on	on	ADP
fuelectenerg-480	78	11	a	a	DET
fuelectenerg-480	78	12	test	test	NOUN
fuelectenerg-480	78	13	fixture	fixture	NOUN
fuelectenerg-480	78	14	and	and	CCONJ
fuelectenerg-480	78	15	an	an	DET
fuelectenerg-480	78	16	antenna	antenna	NOUN
fuelectenerg-480	78	17	coil	coil	NOUN
fuelectenerg-480	78	18	is	be	AUX
fuelectenerg-480	78	19	placed	place	VERB
fuelectenerg-480	78	20	around	around	ADP
fuelectenerg-480	78	21	the	the	DET
fuelectenerg-480	78	22	sensor	sensor	NOUN
fuelectenerg-480	78	23	.	.	PUNCT
fuelectenerg-480	79	1	a	a	DET
fuelectenerg-480	79	2	mts	mts	NOUN
fuelectenerg-480	79	3	(	(	PUNCT
fuelectenerg-480	79	4	manual	manual	ADJ
fuelectenerg-480	79	5	translation	translation	NOUN
fuelectenerg-480	79	6	stage	stage	NOUN
fuelectenerg-480	79	7	)	)	PUNCT
fuelectenerg-480	79	8	is	be	AUX
fuelectenerg-480	79	9	positioned	position	VERB
fuelectenerg-480	79	10	exactly	exactly	ADV
fuelectenerg-480	79	11	above	above	ADP
fuelectenerg-480	79	12	the	the	DET
fuelectenerg-480	79	13	sensor	sensor	NOUN
fuelectenerg-480	79	14	membrane	membrane	NOUN
fuelectenerg-480	79	15	to	to	AUX
fuelectenerg-480	79	16	precisely	precisely	ADV
fuelectenerg-480	79	17	control	control	VERB
fuelectenerg-480	79	18	the	the	DET
fuelectenerg-480	79	19	polyimide	polyimide	ADJ
fuelectenerg-480	79	20	membrane	membrane	NOUN
fuelectenerg-480	79	21	deflection	deflection	NOUN
fuelectenerg-480	79	22	by	by	ADP
fuelectenerg-480	79	23	direct	direct	ADJ
fuelectenerg-480	79	24	contact	contact	NOUN
fuelectenerg-480	79	25	to	to	ADP
fuelectenerg-480	79	26	the	the	DET
fuelectenerg-480	79	27	sensor	sensor	NOUN
fuelectenerg-480	79	28	.	.	PUNCT
fuelectenerg-480	80	1	the	the	DET
fuelectenerg-480	80	2	antenna	antenna	NOUN
fuelectenerg-480	80	3	is	be	AUX
fuelectenerg-480	80	4	connected	connect	VERB
fuelectenerg-480	80	5	to	to	ADP
fuelectenerg-480	80	6	the	the	DET
fuelectenerg-480	80	7	impedance	impedance	NOUN
fuelectenerg-480	80	8	analyzer	analyzer	NOUN
fuelectenerg-480	80	9	hp4191a	hp4191a	PROPN
fuelectenerg-480	80	10	and	and	CCONJ
fuelectenerg-480	80	11	the	the	DET
fuelectenerg-480	80	12	amplitude	amplitude	NOUN
fuelectenerg-480	80	13	of	of	ADP
fuelectenerg-480	80	14	the	the	DET
fuelectenerg-480	80	15	impedance	impedance	NOUN
fuelectenerg-480	80	16	and	and	CCONJ
fuelectenerg-480	80	17	phase	phase	VERB
fuelectenerg-480	80	18	dip	dip	NOUN
fuelectenerg-480	80	19	of	of	ADP
fuelectenerg-480	80	20	the	the	DET
fuelectenerg-480	80	21	system	system	NOUN
fuelectenerg-480	80	22	(	(	PUNCT
fuelectenerg-480	80	23	antenna	antenna	NOUN
fuelectenerg-480	80	24	-	-	PUNCT
fuelectenerg-480	80	25	sensor	sensor	NOUN
fuelectenerg-480	80	26	)	)	PUNCT
fuelectenerg-480	80	27	are	be	AUX
fuelectenerg-480	80	28	measured	measure	VERB
fuelectenerg-480	80	29	.	.	PUNCT
fuelectenerg-480	81	1	a	a	DET
fuelectenerg-480	81	2	)	)	PUNCT
fuelectenerg-480	81	3	b	b	NOUN
fuelectenerg-480	81	4	)	)	PUNCT
fuelectenerg-480	81	5	c	c	NOUN
fuelectenerg-480	81	6	)	)	PUNCT
fuelectenerg-480	81	7	fig	fig	NOUN
fuelectenerg-480	81	8	.	.	PUNCT
fuelectenerg-480	82	1	4	4	NUM
fuelectenerg-480	82	2	a	a	X
fuelectenerg-480	82	3	)	)	PUNCT
fuelectenerg-480	82	4	deflection	deflection	NOUN
fuelectenerg-480	82	5	of	of	ADP
fuelectenerg-480	82	6	the	the	DET
fuelectenerg-480	82	7	sensor	sensor	NOUN
fuelectenerg-480	82	8	’s	’s	PART
fuelectenerg-480	82	9	membrane	membrane	NOUN
fuelectenerg-480	82	10	by	by	ADP
fuelectenerg-480	82	11	application	application	NOUN
fuelectenerg-480	82	12	of	of	ADP
fuelectenerg-480	82	13	the	the	DET
fuelectenerg-480	82	14	mts	mts	NOUN
fuelectenerg-480	82	15	,	,	PUNCT
fuelectenerg-480	82	16	b	b	NOUN
fuelectenerg-480	82	17	)	)	PUNCT
fuelectenerg-480	82	18	the	the	DET
fuelectenerg-480	82	19	setup	setup	NOUN
fuelectenerg-480	82	20	for	for	ADP
fuelectenerg-480	82	21	the	the	DET
fuelectenerg-480	82	22	wireless	wireless	ADJ
fuelectenerg-480	82	23	measurements	measurement	NOUN
fuelectenerg-480	82	24	of	of	ADP
fuelectenerg-480	82	25	the	the	DET
fuelectenerg-480	82	26	displacement	displacement	ADJ
fuelectenerg-480	82	27	sensors	sensor	NOUN
fuelectenerg-480	82	28	and	and	CCONJ
fuelectenerg-480	82	29	c	c	X
fuelectenerg-480	82	30	)	)	PUNCT
fuelectenerg-480	82	31	the	the	DET
fuelectenerg-480	82	32	photograph	photograph	NOUN
fuelectenerg-480	82	33	of	of	ADP
fuelectenerg-480	82	34	the	the	DET
fuelectenerg-480	82	35	mounted	mount	VERB
fuelectenerg-480	82	36	and	and	CCONJ
fuelectenerg-480	82	37	fixed	fix	VERB
fuelectenerg-480	82	38	system	system	NOUN
fuelectenerg-480	82	39	connected	connect	VERB
fuelectenerg-480	82	40	to	to	ADP
fuelectenerg-480	82	41	the	the	DET
fuelectenerg-480	82	42	impedance	impedance	NOUN
fuelectenerg-480	82	43	analyzer	analyzer	NOUN
fuelectenerg-480	82	44	to	to	PART
fuelectenerg-480	82	45	test	test	VERB
fuelectenerg-480	82	46	the	the	DET
fuelectenerg-480	82	47	functionality	functionality	NOUN
fuelectenerg-480	82	48	of	of	ADP
fuelectenerg-480	82	49	the	the	DET
fuelectenerg-480	82	50	displacement	displacement	ADJ
fuelectenerg-480	82	51	sensor	sensor	NOUN
fuelectenerg-480	82	52	performance	performance	NOUN
fuelectenerg-480	82	53	analysis	analysis	NOUN
fuelectenerg-480	82	54	of	of	ADP
fuelectenerg-480	82	55	a	a	DET
fuelectenerg-480	82	56	flexible	flexible	ADJ
fuelectenerg-480	82	57	polyimide	polyimide	NOUN
fuelectenerg-480	82	58	based	base	VERB
fuelectenerg-480	82	59	device	device	NOUN
fuelectenerg-480	82	60	for	for	ADP
fuelectenerg-480	82	61	displacement	displacement	NOUN
fuelectenerg-480	82	62	sensing	sense	VERB
fuelectenerg-480	82	63	293	293	NUM
fuelectenerg-480	82	64	the	the	DET
fuelectenerg-480	82	65	measured	measure	VERB
fuelectenerg-480	82	66	phase	phase	NOUN
fuelectenerg-480	82	67	shift	shift	NOUN
fuelectenerg-480	82	68	without	without	ADP
fuelectenerg-480	82	69	any	any	DET
fuelectenerg-480	82	70	displacement	displacement	NOUN
fuelectenerg-480	82	71	of	of	ADP
fuelectenerg-480	82	72	the	the	DET
fuelectenerg-480	82	73	membrane	membrane	NOUN
fuelectenerg-480	82	74	for	for	ADP
fuelectenerg-480	82	75	two	two	NUM
fuelectenerg-480	82	76	different	different	ADJ
fuelectenerg-480	82	77	ferrite	ferrite	NOUN
fuelectenerg-480	82	78	dimensions	dimension	NOUN
fuelectenerg-480	82	79	is	be	AUX
fuelectenerg-480	82	80	shown	show	VERB
fuelectenerg-480	82	81	in	in	ADP
fuelectenerg-480	82	82	fig	fig	NOUN
fuelectenerg-480	82	83	.	.	PUNCT
fuelectenerg-480	83	1	5	5	X
fuelectenerg-480	83	2	.	.	PUNCT
fuelectenerg-480	83	3	to	to	PART
fuelectenerg-480	83	4	wirelessly	wirelessly	ADV
fuelectenerg-480	83	5	measure	measure	VERB
fuelectenerg-480	83	6	resonant	resonant	ADJ
fuelectenerg-480	83	7	frequency	frequency	NOUN
fuelectenerg-480	83	8	of	of	ADP
fuelectenerg-480	83	9	the	the	DET
fuelectenerg-480	83	10	sensor	sensor	NOUN
fuelectenerg-480	83	11	,	,	PUNCT
fuelectenerg-480	83	12	the	the	DET
fuelectenerg-480	83	13	resonant	resonant	ADJ
fuelectenerg-480	83	14	frequency	frequency	NOUN
fuelectenerg-480	83	15	of	of	ADP
fuelectenerg-480	83	16	the	the	DET
fuelectenerg-480	83	17	antenna	antenna	NOUN
fuelectenerg-480	83	18	should	should	AUX
fuelectenerg-480	83	19	be	be	AUX
fuelectenerg-480	83	20	far	far	ADV
fuelectenerg-480	83	21	enough	enough	ADV
fuelectenerg-480	83	22	from	from	ADP
fuelectenerg-480	83	23	the	the	DET
fuelectenerg-480	83	24	sensor	sensor	NOUN
fuelectenerg-480	83	25	’s	’s	PART
fuelectenerg-480	83	26	resonant	resonant	ADJ
fuelectenerg-480	83	27	frequency	frequency	NOUN
fuelectenerg-480	83	28	.	.	PUNCT
fuelectenerg-480	84	1	the	the	DET
fuelectenerg-480	84	2	sensor	sensor	NOUN
fuelectenerg-480	84	3	with	with	ADP
fuelectenerg-480	84	4	the	the	DET
fuelectenerg-480	84	5	smaller	small	ADJ
fuelectenerg-480	84	6	ferrite	ferrite	NOUN
fuelectenerg-480	84	7	has	have	VERB
fuelectenerg-480	84	8	smaller	small	ADJ
fuelectenerg-480	84	9	inductance	inductance	NOUN
fuelectenerg-480	84	10	value	value	NOUN
fuelectenerg-480	84	11	,	,	PUNCT
fuelectenerg-480	84	12	and	and	CCONJ
fuelectenerg-480	84	13	consequently	consequently	ADV
fuelectenerg-480	84	14	resonant	resonant	ADJ
fuelectenerg-480	84	15	frequency	frequency	NOUN
fuelectenerg-480	84	16	of	of	ADP
fuelectenerg-480	84	17	the	the	DET
fuelectenerg-480	84	18	system	system	NOUN
fuelectenerg-480	84	19	i	i	PRON
fuelectenerg-480	84	20	(	(	PUNCT
fuelectenerg-480	84	21	sensor	sensor	NOUN
fuelectenerg-480	84	22	coil	coil	NOUN
fuelectenerg-480	84	23	,	,	PUNCT
fuelectenerg-480	84	24	smaller	small	ADJ
fuelectenerg-480	84	25	ferrite	ferrite	NOUN
fuelectenerg-480	84	26	r	r	NOUN
fuelectenerg-480	84	27	=	=	SYM
fuelectenerg-480	84	28	6	6	NUM
fuelectenerg-480	84	29	mm	mm	NOUN
fuelectenerg-480	84	30	,	,	PUNCT
fuelectenerg-480	84	31	antenna	antenna	NOUN
fuelectenerg-480	84	32	)	)	PUNCT
fuelectenerg-480	84	33	is	be	AUX
fuelectenerg-480	84	34	higher	high	ADJ
fuelectenerg-480	84	35	compared	compare	VERB
fuelectenerg-480	84	36	to	to	ADP
fuelectenerg-480	84	37	the	the	DET
fuelectenerg-480	84	38	resonant	resonant	ADJ
fuelectenerg-480	84	39	frequency	frequency	NOUN
fuelectenerg-480	84	40	of	of	ADP
fuelectenerg-480	84	41	the	the	DET
fuelectenerg-480	84	42	system	system	NOUN
fuelectenerg-480	84	43	ii	ii	PROPN
fuelectenerg-480	84	44	(	(	PUNCT
fuelectenerg-480	84	45	sensor	sensor	NOUN
fuelectenerg-480	84	46	coil	coil	NOUN
fuelectenerg-480	84	47	,	,	PUNCT
fuelectenerg-480	84	48	larger	large	ADJ
fuelectenerg-480	84	49	ferrite	ferrite	NOUN
fuelectenerg-480	84	50	r	r	NOUN
fuelectenerg-480	84	51	=	=	SYM
fuelectenerg-480	84	52	9.5	9.5	NUM
fuelectenerg-480	84	53	mm	mm	NOUN
fuelectenerg-480	84	54	,	,	PUNCT
fuelectenerg-480	84	55	antenna	antenna	NOUN
fuelectenerg-480	84	56	)	)	PUNCT
fuelectenerg-480	84	57	71.7	71.7	NUM
fuelectenerg-480	84	58	mhz	mhz	NOUN
fuelectenerg-480	84	59	vs.	vs.	ADP
fuelectenerg-480	84	60	64.7	64.7	NUM
fuelectenerg-480	84	61	mhz	mhz	NOUN
fuelectenerg-480	84	62	,	,	PUNCT
fuelectenerg-480	84	63	respectively	respectively	ADV
fuelectenerg-480	84	64	.	.	PUNCT
fuelectenerg-480	85	1	a	a	DET
fuelectenerg-480	85	2	square	square	ADJ
fuelectenerg-480	85	3	spiral	spiral	ADJ
fuelectenerg-480	85	4	winding	winding	NOUN
fuelectenerg-480	85	5	is	be	AUX
fuelectenerg-480	85	6	used	use	VERB
fuelectenerg-480	85	7	as	as	ADP
fuelectenerg-480	85	8	the	the	DET
fuelectenerg-480	85	9	antenna	antenna	NOUN
fuelectenerg-480	85	10	with	with	ADP
fuelectenerg-480	85	11	a	a	DET
fuelectenerg-480	85	12	resonant	resonant	ADJ
fuelectenerg-480	85	13	frequency	frequency	NOUN
fuelectenerg-480	85	14	of	of	ADP
fuelectenerg-480	85	15	145	145	NUM
fuelectenerg-480	85	16	mhz	mhz	NOUN
fuelectenerg-480	85	17	,	,	PUNCT
fuelectenerg-480	85	18	which	which	PRON
fuelectenerg-480	85	19	is	be	AUX
fuelectenerg-480	85	20	sufficiently	sufficiently	ADV
fuelectenerg-480	85	21	far	far	ADV
fuelectenerg-480	85	22	away	away	ADV
fuelectenerg-480	85	23	from	from	ADP
fuelectenerg-480	85	24	measured	measure	VERB
fuelectenerg-480	85	25	resonant	resonant	ADJ
fuelectenerg-480	85	26	frequencies	frequency	NOUN
fuelectenerg-480	85	27	of	of	ADP
fuelectenerg-480	85	28	both	both	DET
fuelectenerg-480	85	29	sensor	sensor	NOUN
fuelectenerg-480	85	30	systems	system	NOUN
fuelectenerg-480	85	31	.	.	PUNCT
fuelectenerg-480	86	1	fig	fig	NOUN
fuelectenerg-480	86	2	.	.	PUNCT
fuelectenerg-480	87	1	5	5	NUM
fuelectenerg-480	87	2	measured	measure	VERB
fuelectenerg-480	87	3	phase	phase	NOUN
fuelectenerg-480	87	4	of	of	ADP
fuelectenerg-480	87	5	the	the	DET
fuelectenerg-480	87	6	impedance	impedance	NOUN
fuelectenerg-480	87	7	of	of	ADP
fuelectenerg-480	87	8	the	the	DET
fuelectenerg-480	87	9	antenna	antenna	NOUN
fuelectenerg-480	87	10	and	and	CCONJ
fuelectenerg-480	87	11	the	the	DET
fuelectenerg-480	87	12	systems	system	NOUN
fuelectenerg-480	87	13	with	with	ADP
fuelectenerg-480	87	14	two	two	NUM
fuelectenerg-480	87	15	different	different	ADJ
fuelectenerg-480	87	16	ferrites	ferrite	NOUN
fuelectenerg-480	87	17	fig	fig	NOUN
fuelectenerg-480	87	18	.	.	PUNCT
fuelectenerg-480	88	1	6	6	NUM
fuelectenerg-480	88	2	wirelessly	wirelessly	ADV
fuelectenerg-480	88	3	monitored	monitor	VERB
fuelectenerg-480	88	4	changes	change	NOUN
fuelectenerg-480	88	5	of	of	ADP
fuelectenerg-480	88	6	the	the	DET
fuelectenerg-480	88	7	amplitude	amplitude	NOUN
fuelectenerg-480	88	8	and	and	CCONJ
fuelectenerg-480	88	9	the	the	DET
fuelectenerg-480	88	10	phase	phase	NOUN
fuelectenerg-480	88	11	dip	dip	NOUN
fuelectenerg-480	88	12	of	of	ADP
fuelectenerg-480	88	13	the	the	DET
fuelectenerg-480	88	14	impedance	impedance	NOUN
fuelectenerg-480	88	15	of	of	ADP
fuelectenerg-480	88	16	the	the	DET
fuelectenerg-480	88	17	system	system	NOUN
fuelectenerg-480	88	18	i	i	PRON
fuelectenerg-480	88	19	(	(	PUNCT
fuelectenerg-480	88	20	smaller	small	ADJ
fuelectenerg-480	88	21	ferrite	ferrite	NOUN
fuelectenerg-480	88	22	)	)	PUNCT
fuelectenerg-480	88	23	for	for	ADP
fuelectenerg-480	88	24	different	different	ADJ
fuelectenerg-480	88	25	displacement	displacement	NOUN
fuelectenerg-480	88	26	(	(	PUNCT
fuelectenerg-480	88	27	in	in	ADP
fuelectenerg-480	88	28	µm	µm	NOUN
fuelectenerg-480	88	29	)	)	PUNCT
fuelectenerg-480	88	30	294	294	NUM
fuelectenerg-480	88	31	m.	m.	NOUN
fuelectenerg-480	88	32	g.	g.	PROPN
fuelectenerg-480	88	33	kisić	kisić	PROPN
fuelectenerg-480	88	34	,	,	PUNCT
fuelectenerg-480	88	35	n.	n.	PROPN
fuelectenerg-480	88	36	v.	v.	ADP
fuelectenerg-480	88	37	blaž	blaž	NOUN
fuelectenerg-480	88	38	,	,	PUNCT
fuelectenerg-480	88	39	k.	k.	PROPN
fuelectenerg-480	88	40	b.	b.	PROPN
fuelectenerg-480	88	41	babković	babković	PROPN
fuelectenerg-480	88	42	,	,	PUNCT
fuelectenerg-480	88	43	et	et	PROPN
fuelectenerg-480	88	44	al	al	PROPN
fuelectenerg-480	88	45	.	.	PROPN
fuelectenerg-480	88	46	fig	fig	PROPN
fuelectenerg-480	88	47	.	.	PUNCT
fuelectenerg-480	88	48	7	7	NUM
fuelectenerg-480	88	49	wirelessly	wirelessly	ADV
fuelectenerg-480	88	50	monitored	monitor	VERB
fuelectenerg-480	88	51	changes	change	NOUN
fuelectenerg-480	88	52	of	of	ADP
fuelectenerg-480	88	53	the	the	DET
fuelectenerg-480	88	54	amplitude	amplitude	NOUN
fuelectenerg-480	88	55	and	and	CCONJ
fuelectenerg-480	88	56	the	the	DET
fuelectenerg-480	88	57	phase	phase	NOUN
fuelectenerg-480	88	58	dip	dip	NOUN
fuelectenerg-480	88	59	of	of	ADP
fuelectenerg-480	88	60	the	the	DET
fuelectenerg-480	88	61	impedance	impedance	NOUN
fuelectenerg-480	88	62	of	of	ADP
fuelectenerg-480	88	63	the	the	DET
fuelectenerg-480	88	64	system	system	NOUN
fuelectenerg-480	88	65	ii	ii	PROPN
fuelectenerg-480	88	66	(	(	PUNCT
fuelectenerg-480	88	67	larger	large	ADJ
fuelectenerg-480	88	68	ferrite	ferrite	NOUN
fuelectenerg-480	88	69	)	)	PUNCT
fuelectenerg-480	88	70	for	for	ADP
fuelectenerg-480	88	71	different	different	ADJ
fuelectenerg-480	88	72	displacements	displacement	NOUN
fuelectenerg-480	88	73	(	(	PUNCT
fuelectenerg-480	88	74	in	in	ADP
fuelectenerg-480	88	75	µm	µm	NOUN
fuelectenerg-480	88	76	)	)	PUNCT
fuelectenerg-480	88	77	the	the	DET
fuelectenerg-480	88	78	measured	measure	VERB
fuelectenerg-480	88	79	data	datum	NOUN
fuelectenerg-480	88	80	for	for	ADP
fuelectenerg-480	88	81	two	two	NUM
fuelectenerg-480	88	82	investigated	investigate	VERB
fuelectenerg-480	88	83	systems	system	NOUN
fuelectenerg-480	88	84	are	be	AUX
fuelectenerg-480	88	85	shown	show	VERB
fuelectenerg-480	88	86	in	in	ADP
fuelectenerg-480	88	87	figs	fig	NOUN
fuelectenerg-480	88	88	6	6	NUM
fuelectenerg-480	88	89	and	and	CCONJ
fuelectenerg-480	88	90	7	7	NUM
fuelectenerg-480	88	91	.	.	NOUN
fuelectenerg-480	88	92	resonant	resonant	ADJ
fuelectenerg-480	88	93	frequencies	frequency	NOUN
fuelectenerg-480	88	94	are	be	AUX
fuelectenerg-480	88	95	determined	determine	VERB
fuelectenerg-480	88	96	from	from	ADP
fuelectenerg-480	88	97	the	the	DET
fuelectenerg-480	88	98	minimum	minimum	ADJ
fuelectenerg-480	88	99	point	point	NOUN
fuelectenerg-480	88	100	of	of	ADP
fuelectenerg-480	88	101	the	the	DET
fuelectenerg-480	88	102	phase	phase	NOUN
fuelectenerg-480	88	103	dip	dip	NOUN
fuelectenerg-480	88	104	for	for	ADP
fuelectenerg-480	88	105	displacement	displacement	ADJ
fuelectenerg-480	88	106	variations	variation	NOUN
fuelectenerg-480	88	107	up	up	ADP
fuelectenerg-480	88	108	to	to	ADP
fuelectenerg-480	88	109	1.2	1.2	NUM
fuelectenerg-480	88	110	mm	mm	NOUN
fuelectenerg-480	88	111	.	.	PUNCT
fuelectenerg-480	89	1	the	the	PRON
fuelectenerg-480	89	2	higher	high	ADJ
fuelectenerg-480	89	3	the	the	DET
fuelectenerg-480	89	4	displacement	displacement	NOUN
fuelectenerg-480	89	5	,	,	PUNCT
fuelectenerg-480	89	6	the	the	PRON
fuelectenerg-480	89	7	closer	close	ADJ
fuelectenerg-480	89	8	the	the	DET
fuelectenerg-480	89	9	ferrite	ferrite	NOUN
fuelectenerg-480	89	10	core	core	NOUN
fuelectenerg-480	89	11	is	be	AUX
fuelectenerg-480	89	12	to	to	ADP
fuelectenerg-480	89	13	the	the	DET
fuelectenerg-480	89	14	sensor	sensor	NOUN
fuelectenerg-480	89	15	coil	coil	NOUN
fuelectenerg-480	89	16	,	,	PUNCT
fuelectenerg-480	89	17	causing	cause	VERB
fuelectenerg-480	89	18	the	the	DET
fuelectenerg-480	89	19	increase	increase	NOUN
fuelectenerg-480	89	20	in	in	ADP
fuelectenerg-480	89	21	the	the	DET
fuelectenerg-480	89	22	inductance	inductance	NOUN
fuelectenerg-480	89	23	and	and	CCONJ
fuelectenerg-480	89	24	consequently	consequently	ADV
fuelectenerg-480	89	25	decreasing	decrease	VERB
fuelectenerg-480	89	26	the	the	DET
fuelectenerg-480	89	27	resonant	resonant	ADJ
fuelectenerg-480	89	28	frequency	frequency	NOUN
fuelectenerg-480	89	29	.	.	PUNCT
fuelectenerg-480	90	1	resonant	resonant	ADJ
fuelectenerg-480	90	2	frequency	frequency	NOUN
fuelectenerg-480	90	3	characteristics	characteristic	NOUN
fuelectenerg-480	90	4	of	of	ADP
fuelectenerg-480	90	5	both	both	DET
fuelectenerg-480	90	6	systems	system	NOUN
fuelectenerg-480	90	7	are	be	AUX
fuelectenerg-480	90	8	shown	show	VERB
fuelectenerg-480	90	9	in	in	ADP
fuelectenerg-480	90	10	fig	fig	NOUN
fuelectenerg-480	90	11	.	.	PUNCT
fuelectenerg-480	91	1	8	8	X
fuelectenerg-480	91	2	.	.	X
fuelectenerg-480	92	1	in	in	ADP
fuelectenerg-480	92	2	the	the	DET
fuelectenerg-480	92	3	measurable	measurable	ADJ
fuelectenerg-480	92	4	displacement	displacement	ADJ
fuelectenerg-480	92	5	range	range	NOUN
fuelectenerg-480	92	6	,	,	PUNCT
fuelectenerg-480	92	7	change	change	NOUN
fuelectenerg-480	92	8	of	of	ADP
fuelectenerg-480	92	9	the	the	DET
fuelectenerg-480	92	10	resonant	resonant	ADJ
fuelectenerg-480	92	11	frequency	frequency	NOUN
fuelectenerg-480	92	12	of	of	ADP
fuelectenerg-480	92	13	the	the	DET
fuelectenerg-480	92	14	system	system	NOUN
fuelectenerg-480	92	15	ii	ii	PROPN
fuelectenerg-480	92	16	(	(	PUNCT
fuelectenerg-480	92	17	with	with	ADP
fuelectenerg-480	92	18	the	the	DET
fuelectenerg-480	92	19	larger	large	ADJ
fuelectenerg-480	92	20	ferrite	ferrite	NOUN
fuelectenerg-480	92	21	)	)	PUNCT
fuelectenerg-480	92	22	is	be	AUX
fuelectenerg-480	92	23	10.5	10.5	NUM
fuelectenerg-480	92	24	mhz	mhz	NOUN
fuelectenerg-480	92	25	and	and	CCONJ
fuelectenerg-480	92	26	sensitivity	sensitivity	NOUN
fuelectenerg-480	92	27	is	be	AUX
fuelectenerg-480	92	28	8.75	8.75	NUM
fuelectenerg-480	92	29	khz/µm	khz/µm	NOUN
fuelectenerg-480	92	30	.	.	PUNCT
fuelectenerg-480	93	1	compared	compare	VERB
fuelectenerg-480	93	2	to	to	ADP
fuelectenerg-480	93	3	the	the	DET
fuelectenerg-480	93	4	system	system	NOUN
fuelectenerg-480	93	5	ii	ii	PROPN
fuelectenerg-480	93	6	,	,	PUNCT
fuelectenerg-480	93	7	measured	measure	VERB
fuelectenerg-480	93	8	change	change	NOUN
fuelectenerg-480	93	9	of	of	ADP
fuelectenerg-480	93	10	the	the	DET
fuelectenerg-480	93	11	resonant	resonant	ADJ
fuelectenerg-480	93	12	frequency	frequency	NOUN
fuelectenerg-480	93	13	and	and	CCONJ
fuelectenerg-480	93	14	sensitivity	sensitivity	NOUN
fuelectenerg-480	93	15	of	of	ADP
fuelectenerg-480	93	16	the	the	DET
fuelectenerg-480	93	17	system	system	NOUN
fuelectenerg-480	93	18	i	i	PRON
fuelectenerg-480	93	19	(	(	PUNCT
fuelectenerg-480	93	20	with	with	ADP
fuelectenerg-480	93	21	the	the	DET
fuelectenerg-480	93	22	smaller	small	ADJ
fuelectenerg-480	93	23	ferrite	ferrite	NOUN
fuelectenerg-480	93	24	)	)	PUNCT
fuelectenerg-480	93	25	are	be	AUX
fuelectenerg-480	93	26	smaller	small	ADJ
fuelectenerg-480	93	27	(	(	PUNCT
fuelectenerg-480	93	28	3.5	3.5	NUM
fuelectenerg-480	93	29	mhz	mhz	NOUN
fuelectenerg-480	93	30	and	and	CCONJ
fuelectenerg-480	93	31	2.92	2.92	NUM
fuelectenerg-480	93	32	khz/µm	khz/µm	NOUN
fuelectenerg-480	93	33	,	,	PUNCT
fuelectenerg-480	93	34	respectively	respectively	ADV
fuelectenerg-480	93	35	)	)	PUNCT
fuelectenerg-480	93	36	.	.	PUNCT
fuelectenerg-480	94	1	an	an	DET
fuelectenerg-480	94	2	increase	increase	NOUN
fuelectenerg-480	94	3	in	in	ADP
fuelectenerg-480	94	4	the	the	DET
fuelectenerg-480	94	5	overlapping	overlap	VERB
fuelectenerg-480	94	6	area	area	NOUN
fuelectenerg-480	94	7	between	between	ADP
fuelectenerg-480	94	8	the	the	DET
fuelectenerg-480	94	9	coil	coil	NOUN
fuelectenerg-480	94	10	and	and	CCONJ
fuelectenerg-480	94	11	the	the	DET
fuelectenerg-480	94	12	ferrite	ferrite	NOUN
fuelectenerg-480	94	13	,	,	PUNCT
fuelectenerg-480	94	14	results	result	NOUN
fuelectenerg-480	94	15	in	in	ADP
fuelectenerg-480	94	16	greater	great	ADJ
fuelectenerg-480	94	17	change	change	NOUN
fuelectenerg-480	94	18	in	in	ADP
fuelectenerg-480	94	19	the	the	DET
fuelectenerg-480	94	20	inductance	inductance	NOUN
fuelectenerg-480	94	21	,	,	PUNCT
fuelectenerg-480	94	22	hence	hence	ADV
fuelectenerg-480	94	23	the	the	DET
fuelectenerg-480	94	24	greater	great	ADJ
fuelectenerg-480	94	25	decrease	decrease	NOUN
fuelectenerg-480	94	26	in	in	ADP
fuelectenerg-480	94	27	the	the	DET
fuelectenerg-480	94	28	system	system	NOUN
fuelectenerg-480	94	29	’s	’s	PART
fuelectenerg-480	94	30	resonant	resonant	ADJ
fuelectenerg-480	94	31	frequency	frequency	NOUN
fuelectenerg-480	94	32	.	.	PUNCT
fuelectenerg-480	95	1	fig	fig	NOUN
fuelectenerg-480	95	2	.	.	PUNCT
fuelectenerg-480	96	1	8	8	NUM
fuelectenerg-480	96	2	resonant	resonant	ADJ
fuelectenerg-480	96	3	frequency	frequency	NOUN
fuelectenerg-480	96	4	characteristics	characteristic	NOUN
fuelectenerg-480	96	5	of	of	ADP
fuelectenerg-480	96	6	systems	system	NOUN
fuelectenerg-480	96	7	with	with	ADP
fuelectenerg-480	96	8	two	two	NUM
fuelectenerg-480	96	9	different	different	ADJ
fuelectenerg-480	96	10	ferrite	ferrite	NOUN
fuelectenerg-480	96	11	radii	radius	NOUN
fuelectenerg-480	96	12	performance	performance	NOUN
fuelectenerg-480	96	13	analysis	analysis	NOUN
fuelectenerg-480	96	14	of	of	ADP
fuelectenerg-480	96	15	a	a	DET
fuelectenerg-480	96	16	flexible	flexible	ADJ
fuelectenerg-480	96	17	polyimide	polyimide	NOUN
fuelectenerg-480	96	18	based	base	VERB
fuelectenerg-480	96	19	device	device	NOUN
fuelectenerg-480	96	20	for	for	ADP
fuelectenerg-480	96	21	displacement	displacement	NOUN
fuelectenerg-480	96	22	sensing	sense	VERB
fuelectenerg-480	96	23	295	295	NUM
fuelectenerg-480	96	24	5	5	NUM
fuelectenerg-480	96	25	.	.	PUNCT
fuelectenerg-480	96	26	conclusion	conclusion	NOUN
fuelectenerg-480	96	27	in	in	ADP
fuelectenerg-480	96	28	our	our	PRON
fuelectenerg-480	96	29	previous	previous	ADJ
fuelectenerg-480	96	30	work	work	NOUN
fuelectenerg-480	96	31	[	[	X
fuelectenerg-480	96	32	29	29	NUM
fuelectenerg-480	96	33	]	]	PUNCT
fuelectenerg-480	96	34	,	,	PUNCT
fuelectenerg-480	96	35	application	application	NOUN
fuelectenerg-480	96	36	of	of	ADP
fuelectenerg-480	96	37	polyimide	polyimide	NOUN
fuelectenerg-480	96	38	foil	foil	NOUN
fuelectenerg-480	96	39	as	as	ADP
fuelectenerg-480	96	40	a	a	DET
fuelectenerg-480	96	41	membrane	membrane	NOUN
fuelectenerg-480	96	42	in	in	ADP
fuelectenerg-480	96	43	displacement	displacement	ADJ
fuelectenerg-480	96	44	sensor	sensor	NOUN
fuelectenerg-480	96	45	was	be	AUX
fuelectenerg-480	96	46	investigated	investigate	VERB
fuelectenerg-480	96	47	.	.	PUNCT
fuelectenerg-480	97	1	the	the	DET
fuelectenerg-480	97	2	principle	principle	NOUN
fuelectenerg-480	97	3	of	of	ADP
fuelectenerg-480	97	4	operation	operation	NOUN
fuelectenerg-480	97	5	of	of	ADP
fuelectenerg-480	97	6	the	the	DET
fuelectenerg-480	97	7	presented	present	VERB
fuelectenerg-480	97	8	sensor	sensor	NOUN
fuelectenerg-480	97	9	is	be	AUX
fuelectenerg-480	97	10	based	base	VERB
fuelectenerg-480	97	11	on	on	ADP
fuelectenerg-480	97	12	the	the	DET
fuelectenerg-480	97	13	deflection	deflection	NOUN
fuelectenerg-480	97	14	of	of	ADP
fuelectenerg-480	97	15	a	a	DET
fuelectenerg-480	97	16	membrane	membrane	NOUN
fuelectenerg-480	97	17	,	,	PUNCT
fuelectenerg-480	97	18	hence	hence	ADV
fuelectenerg-480	97	19	approaching	approach	VERB
fuelectenerg-480	97	20	the	the	DET
fuelectenerg-480	97	21	ferrite	ferrite	NOUN
fuelectenerg-480	97	22	closer	close	ADV
fuelectenerg-480	97	23	to	to	ADP
fuelectenerg-480	97	24	the	the	DET
fuelectenerg-480	97	25	sensor	sensor	NOUN
fuelectenerg-480	97	26	coil	coil	NOUN
fuelectenerg-480	97	27	and	and	CCONJ
fuelectenerg-480	97	28	the	the	DET
fuelectenerg-480	97	29	subsequent	subsequent	ADJ
fuelectenerg-480	97	30	measurement	measurement	NOUN
fuelectenerg-480	97	31	of	of	ADP
fuelectenerg-480	97	32	the	the	DET
fuelectenerg-480	97	33	phase	phase	NOUN
fuelectenerg-480	97	34	-	-	PUNCT
fuelectenerg-480	97	35	dip	dip	NOUN
fuelectenerg-480	97	36	of	of	ADP
fuelectenerg-480	97	37	the	the	DET
fuelectenerg-480	97	38	sensor	sensor	NOUN
fuelectenerg-480	97	39	-	-	PUNCT
fuelectenerg-480	97	40	antenna	antenna	NOUN
fuelectenerg-480	97	41	system	system	NOUN
fuelectenerg-480	97	42	.	.	PUNCT
fuelectenerg-480	98	1	using	use	VERB
fuelectenerg-480	98	2	sensor	sensor	NOUN
fuelectenerg-480	98	3	structures	structure	NOUN
fuelectenerg-480	98	4	with	with	ADP
fuelectenerg-480	98	5	the	the	DET
fuelectenerg-480	98	6	same	same	ADJ
fuelectenerg-480	98	7	outer	outer	ADJ
fuelectenerg-480	98	8	dimensions	dimension	NOUN
fuelectenerg-480	98	9	but	but	CCONJ
fuelectenerg-480	98	10	larger	large	ADJ
fuelectenerg-480	98	11	ferrites	ferrite	NOUN
fuelectenerg-480	98	12	yields	yield	VERB
fuelectenerg-480	98	13	a	a	DET
fuelectenerg-480	98	14	3	3	NUM
fuelectenerg-480	98	15	times	time	NOUN
fuelectenerg-480	98	16	greater	great	ADJ
fuelectenerg-480	98	17	change	change	NOUN
fuelectenerg-480	98	18	in	in	ADP
fuelectenerg-480	98	19	the	the	DET
fuelectenerg-480	98	20	resonant	resonant	ADJ
fuelectenerg-480	98	21	frequency	frequency	NOUN
fuelectenerg-480	98	22	(	(	PUNCT
fuelectenerg-480	98	23	10.5	10.5	NUM
fuelectenerg-480	98	24	mhz	mhz	NOUN
fuelectenerg-480	98	25	vs.	vs.	ADP
fuelectenerg-480	98	26	3.5	3.5	NUM
fuelectenerg-480	98	27	mhz	mhz	NOUN
fuelectenerg-480	98	28	)	)	PUNCT
fuelectenerg-480	98	29	and	and	CCONJ
fuelectenerg-480	98	30	sensitivity	sensitivity	NOUN
fuelectenerg-480	98	31	(	(	PUNCT
fuelectenerg-480	98	32	8.75	8.75	NUM
fuelectenerg-480	98	33	khz/µm	khz/µm	NOUN
fuelectenerg-480	98	34	vs.	vs.	ADP
fuelectenerg-480	98	35	2.92	2.92	NUM
fuelectenerg-480	98	36	khz/µm	khz/µm	NOUN
fuelectenerg-480	98	37	)	)	PUNCT
fuelectenerg-480	98	38	of	of	ADP
fuelectenerg-480	98	39	the	the	DET
fuelectenerg-480	98	40	system	system	NOUN
fuelectenerg-480	98	41	for	for	ADP
fuelectenerg-480	98	42	the	the	DET
fuelectenerg-480	98	43	same	same	ADJ
fuelectenerg-480	98	44	amount	amount	NOUN
fuelectenerg-480	98	45	of	of	ADP
fuelectenerg-480	98	46	displacement	displacement	NOUN
fuelectenerg-480	98	47	.	.	PUNCT
fuelectenerg-480	99	1	therefore	therefore	ADV
fuelectenerg-480	99	2	,	,	PUNCT
fuelectenerg-480	99	3	in	in	ADP
fuelectenerg-480	99	4	order	order	NOUN
fuelectenerg-480	99	5	to	to	PART
fuelectenerg-480	99	6	enhance	enhance	VERB
fuelectenerg-480	99	7	the	the	DET
fuelectenerg-480	99	8	performance	performance	NOUN
fuelectenerg-480	99	9	of	of	ADP
fuelectenerg-480	99	10	the	the	DET
fuelectenerg-480	99	11	sensor	sensor	NOUN
fuelectenerg-480	99	12	,	,	PUNCT
fuelectenerg-480	99	13	the	the	DET
fuelectenerg-480	99	14	dimensions	dimension	NOUN
fuelectenerg-480	99	15	of	of	ADP
fuelectenerg-480	99	16	the	the	DET
fuelectenerg-480	99	17	coil	coil	NOUN
fuelectenerg-480	99	18	and	and	CCONJ
fuelectenerg-480	99	19	the	the	DET
fuelectenerg-480	99	20	ferrite	ferrite	NOUN
fuelectenerg-480	99	21	have	have	VERB
fuelectenerg-480	99	22	to	to	PART
fuelectenerg-480	99	23	be	be	AUX
fuelectenerg-480	99	24	appropriately	appropriately	ADV
fuelectenerg-480	99	25	selected	select	VERB
fuelectenerg-480	99	26	.	.	PUNCT
fuelectenerg-480	100	1	future	future	ADJ
fuelectenerg-480	100	2	work	work	NOUN
fuelectenerg-480	100	3	will	will	AUX
fuelectenerg-480	100	4	be	be	AUX
fuelectenerg-480	100	5	directed	direct	VERB
fuelectenerg-480	100	6	towards	towards	ADP
fuelectenerg-480	100	7	optimization	optimization	NOUN
fuelectenerg-480	100	8	of	of	ADP
fuelectenerg-480	100	9	the	the	DET
fuelectenerg-480	100	10	coil	coil	NOUN
fuelectenerg-480	100	11	layouts	layout	NOUN
fuelectenerg-480	100	12	and	and	CCONJ
fuelectenerg-480	100	13	the	the	DET
fuelectenerg-480	100	14	development	development	NOUN
fuelectenerg-480	100	15	of	of	ADP
fuelectenerg-480	100	16	new	new	ADJ
fuelectenerg-480	100	17	designs	design	NOUN
fuelectenerg-480	100	18	with	with	ADP
fuelectenerg-480	100	19	different	different	ADJ
fuelectenerg-480	100	20	technologies	technology	NOUN
fuelectenerg-480	100	21	in	in	ADP
fuelectenerg-480	100	22	order	order	NOUN
fuelectenerg-480	100	23	to	to	PART
fuelectenerg-480	100	24	fabricate	fabricate	VERB
fuelectenerg-480	100	25	sensors	sensor	NOUN
fuelectenerg-480	100	26	with	with	ADP
fuelectenerg-480	100	27	the	the	DET
fuelectenerg-480	100	28	coil	coil	NOUN
fuelectenerg-480	100	29	fabricated	fabricate	VERB
fuelectenerg-480	100	30	on	on	ADP
fuelectenerg-480	100	31	the	the	DET
fuelectenerg-480	100	32	membrane	membrane	NOUN
fuelectenerg-480	100	33	.	.	PUNCT
fuelectenerg-480	101	1	acknowledgement	acknowledgement	NOUN
fuelectenerg-480	101	2	.	.	PUNCT
fuelectenerg-480	102	1	this	this	DET
fuelectenerg-480	102	2	work	work	NOUN
fuelectenerg-480	102	3	was	be	AUX
fuelectenerg-480	102	4	supported	support	VERB
fuelectenerg-480	102	5	in	in	ADP
fuelectenerg-480	102	6	part	part	NOUN
fuelectenerg-480	102	7	by	by	ADP
fuelectenerg-480	102	8	the	the	DET
fuelectenerg-480	102	9	ministry	ministry	PROPN
fuelectenerg-480	102	10	of	of	ADP
fuelectenerg-480	102	11	education	education	PROPN
fuelectenerg-480	102	12	,	,	PUNCT
fuelectenerg-480	102	13	science	science	NOUN
fuelectenerg-480	102	14	and	and	CCONJ
fuelectenerg-480	102	15	technological	technological	ADJ
fuelectenerg-480	102	16	development	development	NOUN
fuelectenerg-480	102	17	,	,	PUNCT
fuelectenerg-480	102	18	republic	republic	NOUN
fuelectenerg-480	102	19	of	of	ADP
fuelectenerg-480	102	20	serbia	serbia	PROPN
fuelectenerg-480	102	21	,	,	PUNCT
fuelectenerg-480	102	22	on	on	ADP
fuelectenerg-480	102	23	project	project	NOUN
fuelectenerg-480	102	24	number	number	NOUN
fuelectenerg-480	102	25	tr-32016	tr-32016	NOUN
fuelectenerg-480	102	26	and	and	CCONJ
fuelectenerg-480	102	27	iii45021	iii45021	NOUN
fuelectenerg-480	102	28	.	.	PUNCT
fuelectenerg-480	103	1	references	reference	NOUN
fuelectenerg-480	103	2	[	[	X
fuelectenerg-480	103	3	1	1	NUM
fuelectenerg-480	103	4	]	]	PUNCT
fuelectenerg-480	103	5	g.	g.	PROPN
fuelectenerg-480	103	6	y.	y.	PROPN
fuelectenerg-480	103	7	tian	tian	PROPN
fuelectenerg-480	103	8	,	,	PUNCT
fuelectenerg-480	103	9	z.	z.	PROPN
fuelectenerg-480	103	10	x.	x.	PROPN
fuelectenerg-480	103	11	zhao	zhao	PROPN
fuelectenerg-480	103	12	and	and	CCONJ
fuelectenerg-480	103	13	r.	r.	PROPN
fuelectenerg-480	103	14	w.	w.	PROPN
fuelectenerg-480	103	15	baines	baines	PROPN
fuelectenerg-480	103	16	,	,	PUNCT
fuelectenerg-480	103	17	"	"	PUNCT
fuelectenerg-480	103	18	the	the	DET
fuelectenerg-480	103	19	research	research	NOUN
fuelectenerg-480	103	20	of	of	ADP
fuelectenerg-480	103	21	inhomogeneity	inhomogeneity	NOUN
fuelectenerg-480	103	22	in	in	ADP
fuelectenerg-480	103	23	eddy	eddy	PROPN
fuelectenerg-480	103	24	current	current	ADJ
fuelectenerg-480	103	25	sensors	sensor	NOUN
fuelectenerg-480	103	26	"	"	PUNCT
fuelectenerg-480	103	27	,	,	PUNCT
fuelectenerg-480	103	28	sensors	sensor	NOUN
fuelectenerg-480	103	29	and	and	CCONJ
fuelectenerg-480	103	30	actuators	actuator	NOUN
fuelectenerg-480	103	31	a	a	DET
fuelectenerg-480	103	32	,	,	PUNCT
fuelectenerg-480	103	33	vol	vol	NOUN
fuelectenerg-480	103	34	.	.	PROPN
fuelectenerg-480	103	35	69	69	NUM
fuelectenerg-480	103	36	,	,	PUNCT
fuelectenerg-480	103	37	pp	pp	ADJ
fuelectenerg-480	103	38	.	.	PUNCT
fuelectenerg-480	104	1	148	148	NUM
fuelectenerg-480	104	2	-	-	SYM
fuelectenerg-480	104	3	151	151	NUM
fuelectenerg-480	104	4	,	,	PUNCT
fuelectenerg-480	104	5	1998	1998	NUM
fuelectenerg-480	104	6	.	.	PUNCT
fuelectenerg-480	105	1	[	[	X
fuelectenerg-480	105	2	2	2	X
fuelectenerg-480	105	3	]	]	PUNCT
fuelectenerg-480	105	4	d.	d.	PROPN
fuelectenerg-480	105	5	hofstetter	hofstetter	PROPN
fuelectenerg-480	105	6	,	,	PUNCT
fuelectenerg-480	105	7	h.	h.	PROPN
fuelectenerg-480	105	8	p.	p.	PROPN
fuelectenerg-480	105	9	zappe	zappe	PROPN
fuelectenerg-480	105	10	and	and	CCONJ
fuelectenerg-480	105	11	r.	r.	PROPN
fuelectenerg-480	105	12	dandliker	dandliker	PROPN
fuelectenerg-480	105	13	,	,	PUNCT
fuelectenerg-480	105	14	"	"	PUNCT
fuelectenerg-480	105	15	optical	optical	ADJ
fuelectenerg-480	105	16	displacement	displacement	NOUN
fuelectenerg-480	105	17	measurement	measurement	NOUN
fuelectenerg-480	105	18	with	with	ADP
fuelectenerg-480	105	19	gaas	gaas	PROPN
fuelectenerg-480	105	20	/	/	PUNCT
fuelectenerg-480	105	21	algaasbased	algaasbase	VERB
fuelectenerg-480	105	22	monolithically	monolithically	ADV
fuelectenerg-480	105	23	integrated	integrate	VERB
fuelectenerg-480	105	24	michelson	michelson	PROPN
fuelectenerg-480	105	25	interferometers	interferometer	NOUN
fuelectenerg-480	105	26	"	"	PUNCT
fuelectenerg-480	105	27	,	,	PUNCT
fuelectenerg-480	105	28	journal	journal	PROPN
fuelectenerg-480	105	29	lightwave	lightwave	PROPN
fuelectenerg-480	105	30	technology	technology	PROPN
fuelectenerg-480	105	31	,	,	PUNCT
fuelectenerg-480	105	32	vol	vol	NOUN
fuelectenerg-480	105	33	.	.	PROPN
fuelectenerg-480	105	34	15	15	NUM
fuelectenerg-480	105	35	,	,	PUNCT
fuelectenerg-480	105	36	no	no	INTJ
fuelectenerg-480	105	37	.	.	NOUN
fuelectenerg-480	105	38	4	4	NUM
fuelectenerg-480	105	39	,	,	PUNCT
fuelectenerg-480	105	40	pp	pp	ADJ
fuelectenerg-480	105	41	.	.	PUNCT
fuelectenerg-480	106	1	663	663	NUM
fuelectenerg-480	106	2	–	–	PUNCT
fuelectenerg-480	106	3	670	670	NUM
fuelectenerg-480	106	4	,	,	PUNCT
fuelectenerg-480	106	5	april	april	PROPN
fuelectenerg-480	106	6	1997	1997	NUM
fuelectenerg-480	106	7	.	.	PUNCT
fuelectenerg-480	107	1	[	[	X
fuelectenerg-480	107	2	3	3	X
fuelectenerg-480	107	3	]	]	PUNCT
fuelectenerg-480	107	4	s.	s.	PROPN
fuelectenerg-480	107	5	j.	j.	PROPN
fuelectenerg-480	107	6	lee	lee	PROPN
fuelectenerg-480	107	7	,	,	PUNCT
fuelectenerg-480	107	8	y.	y.	PROPN
fuelectenerg-480	107	9	melikhov	melikhov	PROPN
fuelectenerg-480	107	10	,	,	PUNCT
fuelectenerg-480	107	11	c.	c.	PROPN
fuelectenerg-480	107	12	m.	m.	PROPN
fuelectenerg-480	107	13	park	park	PROPN
fuelectenerg-480	107	14	,	,	PUNCT
fuelectenerg-480	107	15	h.	h.	PROPN
fuelectenerg-480	107	16	hauser	hauser	PROPN
fuelectenerg-480	107	17	and	and	CCONJ
fuelectenerg-480	107	18	d.	d.	PROPN
fuelectenerg-480	107	19	c.	c.	PROPN
fuelectenerg-480	107	20	jiles	jiles	PROPN
fuelectenerg-480	107	21	,	,	PUNCT
fuelectenerg-480	107	22	"	"	PUNCT
fuelectenerg-480	107	23	analysis	analysis	NOUN
fuelectenerg-480	107	24	of	of	ADP
fuelectenerg-480	107	25	a	a	DET
fuelectenerg-480	107	26	remote	remote	ADJ
fuelectenerg-480	107	27	magneto	magneto	NOUN
fuelectenerg-480	107	28	-	-	PUNCT
fuelectenerg-480	107	29	optic	optic	ADJ
fuelectenerg-480	107	30	linear	linear	ADJ
fuelectenerg-480	107	31	displacement	displacement	ADJ
fuelectenerg-480	107	32	sensor	sensor	NOUN
fuelectenerg-480	107	33	using	use	VERB
fuelectenerg-480	107	34	a	a	DET
fuelectenerg-480	107	35	jones	jones	PROPN
fuelectenerg-480	107	36	matrix	matrix	NOUN
fuelectenerg-480	107	37	approach	approach	NOUN
fuelectenerg-480	107	38	"	"	PUNCT
fuelectenerg-480	107	39	,	,	PUNCT
fuelectenerg-480	107	40	ieee	ieee	NOUN
fuelectenerg-480	107	41	transaction	transaction	NOUN
fuelectenerg-480	107	42	on	on	ADP
fuelectenerg-480	107	43	magnetics	magnetic	NOUN
fuelectenerg-480	107	44	,	,	PUNCT
fuelectenerg-480	107	45	vol	vol	NOUN
fuelectenerg-480	107	46	.	.	PROPN
fuelectenerg-480	107	47	42	42	NUM
fuelectenerg-480	107	48	,	,	PUNCT
fuelectenerg-480	107	49	no	no	INTJ
fuelectenerg-480	107	50	.	.	NOUN
fuelectenerg-480	107	51	10	10	NUM
fuelectenerg-480	107	52	,	,	PUNCT
fuelectenerg-480	107	53	pp	pp	ADJ
fuelectenerg-480	107	54	.	.	PUNCT
fuelectenerg-480	107	55	3273	3273	NUM
fuelectenerg-480	107	56	–	–	PUNCT
fuelectenerg-480	107	57	3275	3275	NUM
fuelectenerg-480	107	58	,	,	PUNCT
fuelectenerg-480	107	59	october	october	PROPN
fuelectenerg-480	107	60	2006	2006	NUM
fuelectenerg-480	107	61	.	.	PUNCT
fuelectenerg-480	108	1	[	[	X
fuelectenerg-480	108	2	4	4	NUM
fuelectenerg-480	108	3	]	]	PUNCT
fuelectenerg-480	108	4	a.	a.	NOUN
fuelectenerg-480	108	5	bergamin	bergamin	PROPN
fuelectenerg-480	108	6	,	,	PUNCT
fuelectenerg-480	108	7	g.	g.	PROPN
fuelectenerg-480	108	8	cavagnero	cavagnero	PROPN
fuelectenerg-480	108	9	and	and	CCONJ
fuelectenerg-480	108	10	g.	g.	PROPN
fuelectenerg-480	108	11	mana	mana	PROPN
fuelectenerg-480	108	12	,	,	PUNCT
fuelectenerg-480	108	13	"	"	PUNCT
fuelectenerg-480	108	14	a	a	DET
fuelectenerg-480	108	15	displacement	displacement	NOUN
fuelectenerg-480	108	16	and	and	CCONJ
fuelectenerg-480	108	17	angle	angle	NOUN
fuelectenerg-480	108	18	interferometer	interferometer	NOUN
fuelectenerg-480	108	19	with	with	ADP
fuelectenerg-480	108	20	subatomic	subatomic	ADJ
fuelectenerg-480	108	21	resolution	resolution	NOUN
fuelectenerg-480	108	22	"	"	PUNCT
fuelectenerg-480	108	23	,	,	PUNCT
fuelectenerg-480	108	24	review	review	NOUN
fuelectenerg-480	108	25	of	of	ADP
fuelectenerg-480	108	26	scientific	scientific	ADJ
fuelectenerg-480	108	27	instruments	instrument	NOUN
fuelectenerg-480	108	28	,	,	PUNCT
fuelectenerg-480	108	29	vol	vol	NOUN
fuelectenerg-480	108	30	.	.	PROPN
fuelectenerg-480	108	31	64	64	NUM
fuelectenerg-480	108	32	,	,	PUNCT
fuelectenerg-480	108	33	pp	pp	ADJ
fuelectenerg-480	108	34	.	.	PUNCT
fuelectenerg-480	109	1	3076	3076	NUM
fuelectenerg-480	109	2	-	-	SYM
fuelectenerg-480	109	3	3081	3081	NUM
fuelectenerg-480	109	4	,	,	PUNCT
fuelectenerg-480	109	5	august	august	PROPN
fuelectenerg-480	109	6	1993	1993	NUM
fuelectenerg-480	109	7	.	.	PUNCT
fuelectenerg-480	110	1	[	[	X
fuelectenerg-480	110	2	5	5	NUM
fuelectenerg-480	110	3	]	]	PUNCT
fuelectenerg-480	110	4	m.	m.	NOUN
fuelectenerg-480	110	5	m.	m.	PROPN
fuelectenerg-480	110	6	miller	miller	PROPN
fuelectenerg-480	110	7	,	,	PUNCT
fuelectenerg-480	110	8	p.	p.	PROPN
fuelectenerg-480	110	9	lubitz	lubitz	PROPN
fuelectenerg-480	110	10	,	,	PUNCT
fuelectenerg-480	110	11	g.	g.	PROPN
fuelectenerg-480	110	12	a.	a.	PROPN
fuelectenerg-480	110	13	prinz	prinz	PROPN
fuelectenerg-480	110	14	,	,	PUNCT
fuelectenerg-480	110	15	j.	j.	PROPN
fuelectenerg-480	110	16	j.	j.	PROPN
fuelectenerg-480	110	17	krebs	krebs	PROPN
fuelectenerg-480	110	18	and	and	CCONJ
fuelectenerg-480	110	19	a.	a.	PROPN
fuelectenerg-480	110	20	s.	s.	PROPN
fuelectenerg-480	110	21	edelstein	edelstein	PROPN
fuelectenerg-480	110	22	,	,	PUNCT
fuelectenerg-480	110	23	"	"	PUNCT
fuelectenerg-480	110	24	development	development	NOUN
fuelectenerg-480	110	25	of	of	ADP
fuelectenerg-480	110	26	a	a	DET
fuelectenerg-480	110	27	high	high	ADJ
fuelectenerg-480	110	28	precision	precision	NOUN
fuelectenerg-480	110	29	absolute	absolute	ADJ
fuelectenerg-480	110	30	linear	linear	ADJ
fuelectenerg-480	110	31	displacement	displacement	ADJ
fuelectenerg-480	110	32	sensor	sensor	NOUN
fuelectenerg-480	110	33	utilizing	utilize	VERB
fuelectenerg-480	110	34	gmr	gmr	NOUN
fuelectenerg-480	110	35	spin	spin	NOUN
fuelectenerg-480	110	36	-	-	PUNCT
fuelectenerg-480	110	37	valves	valve	NOUN
fuelectenerg-480	110	38	"	"	PUNCT
fuelectenerg-480	110	39	,	,	PUNCT
fuelectenerg-480	110	40	ieee	ieee	NOUN
fuelectenerg-480	110	41	transaction	transaction	NOUN
fuelectenerg-480	110	42	on	on	ADP
fuelectenerg-480	110	43	magnetics	magnetic	NOUN
fuelectenerg-480	110	44	,	,	PUNCT
fuelectenerg-480	110	45	vol	vol	NOUN
fuelectenerg-480	110	46	.	.	PROPN
fuelectenerg-480	110	47	33	33	NUM
fuelectenerg-480	110	48	,	,	PUNCT
fuelectenerg-480	110	49	no	no	INTJ
fuelectenerg-480	110	50	.	.	NOUN
fuelectenerg-480	110	51	5	5	NUM
fuelectenerg-480	110	52	,	,	PUNCT
fuelectenerg-480	110	53	pp	pp	ADJ
fuelectenerg-480	110	54	.	.	PUNCT
fuelectenerg-480	110	55	33883390	33883390	NUM
fuelectenerg-480	110	56	,	,	PUNCT
fuelectenerg-480	110	57	september	september	PROPN
fuelectenerg-480	110	58	1997	1997	NUM
fuelectenerg-480	110	59	.	.	PUNCT
fuelectenerg-480	111	1	[	[	X
fuelectenerg-480	111	2	6	6	NUM
fuelectenerg-480	111	3	]	]	PUNCT
fuelectenerg-480	111	4	a.	a.	NOUN
fuelectenerg-480	111	5	arkadan	arkadan	PROPN
fuelectenerg-480	111	6	,	,	PUNCT
fuelectenerg-480	111	7	s.	s.	PROPN
fuelectenerg-480	111	8	subramaniam	subramaniam	PROPN
fuelectenerg-480	111	9	,	,	PUNCT
fuelectenerg-480	111	10	sivanesan	sivanesan	ADJ
fuelectenerg-480	111	11	and	and	CCONJ
fuelectenerg-480	111	12	o.	o.	NOUN
fuelectenerg-480	111	13	douedari	douedari	NOUN
fuelectenerg-480	111	14	,	,	PUNCT
fuelectenerg-480	111	15	"	"	PUNCT
fuelectenerg-480	111	16	design	design	NOUN
fuelectenerg-480	111	17	optimization	optimization	NOUN
fuelectenerg-480	111	18	of	of	ADP
fuelectenerg-480	111	19	a	a	DET
fuelectenerg-480	111	20	capacitive	capacitive	ADJ
fuelectenerg-480	111	21	transducer	transducer	NOUN
fuelectenerg-480	111	22	for	for	ADP
fuelectenerg-480	111	23	displacement	displacement	ADJ
fuelectenerg-480	111	24	measurement	measurement	NOUN
fuelectenerg-480	111	25	"	"	PUNCT
fuelectenerg-480	111	26	,	,	PUNCT
fuelectenerg-480	111	27	ieee	ieee	NOUN
fuelectenerg-480	111	28	transaction	transaction	NOUN
fuelectenerg-480	111	29	on	on	ADP
fuelectenerg-480	111	30	magnetics	magnetic	NOUN
fuelectenerg-480	111	31	,	,	PUNCT
fuelectenerg-480	111	32	vol	vol	NOUN
fuelectenerg-480	111	33	.	.	PROPN
fuelectenerg-480	111	34	35	35	NUM
fuelectenerg-480	111	35	,	,	PUNCT
fuelectenerg-480	111	36	pp	pp	ADJ
fuelectenerg-480	111	37	.	.	PUNCT
fuelectenerg-480	111	38	1869	1869	NUM
fuelectenerg-480	111	39	1872	1872	NUM
fuelectenerg-480	111	40	,	,	PUNCT
fuelectenerg-480	111	41	may	may	PROPN
fuelectenerg-480	111	42	1999	1999	NUM
fuelectenerg-480	111	43	.	.	PUNCT
fuelectenerg-480	112	1	[	[	X
fuelectenerg-480	112	2	7	7	X
fuelectenerg-480	112	3	]	]	PUNCT
fuelectenerg-480	112	4	m.	m.	NOUN
fuelectenerg-480	112	5	hirasawa	hirasawa	PROPN
fuelectenerg-480	112	6	,	,	PUNCT
fuelectenerg-480	112	7	m.	m.	NOUN
fuelectenerg-480	112	8	nakamura	nakamura	NOUN
fuelectenerg-480	112	9	and	and	CCONJ
fuelectenerg-480	112	10	m.	m.	NOUN
fuelectenerg-480	112	11	kanno	kanno	PROPN
fuelectenerg-480	112	12	,	,	PUNCT
fuelectenerg-480	112	13	"	"	PUNCT
fuelectenerg-480	112	14	optimum	optimum	ADJ
fuelectenerg-480	112	15	form	form	NOUN
fuelectenerg-480	112	16	of	of	ADP
fuelectenerg-480	112	17	capacitive	capacitive	ADJ
fuelectenerg-480	112	18	transducer	transducer	NOUN
fuelectenerg-480	112	19	for	for	ADP
fuelectenerg-480	112	20	displacement	displacement	ADJ
fuelectenerg-480	112	21	measurement	measurement	NOUN
fuelectenerg-480	112	22	"	"	PUNCT
fuelectenerg-480	112	23	,	,	PUNCT
fuelectenerg-480	112	24	ieee	ieee	NOUN
fuelectenerg-480	112	25	transaction	transaction	NOUN
fuelectenerg-480	112	26	on	on	ADP
fuelectenerg-480	112	27	instrumentation	instrumentation	NOUN
fuelectenerg-480	112	28	and	and	CCONJ
fuelectenerg-480	112	29	measurement	measurement	NOUN
fuelectenerg-480	112	30	,	,	PUNCT
fuelectenerg-480	112	31	vol	vol	NOUN
fuelectenerg-480	112	32	.	.	PROPN
fuelectenerg-480	113	1	3	3	NUM
fuelectenerg-480	113	2	,	,	PUNCT
fuelectenerg-480	113	3	pp	pp	ADJ
fuelectenerg-480	113	4	.	.	PUNCT
fuelectenerg-480	114	1	276	276	NUM
fuelectenerg-480	114	2	–	–	PUNCT
fuelectenerg-480	114	3	280	280	NUM
fuelectenerg-480	114	4	,	,	PUNCT
fuelectenerg-480	114	5	december	december	PROPN
fuelectenerg-480	114	6	1984	1984	NUM
fuelectenerg-480	114	7	.	.	PUNCT
fuelectenerg-480	115	1	[	[	X
fuelectenerg-480	115	2	8	8	NUM
fuelectenerg-480	115	3	]	]	PUNCT
fuelectenerg-480	115	4	m.	m.	NOUN
fuelectenerg-480	115	5	kim	kim	PROPN
fuelectenerg-480	115	6	and	and	CCONJ
fuelectenerg-480	115	7	w.	w.	PROPN
fuelectenerg-480	115	8	moon	moon	PROPN
fuelectenerg-480	115	9	,	,	PUNCT
fuelectenerg-480	115	10	"	"	PUNCT
fuelectenerg-480	115	11	a	a	DET
fuelectenerg-480	115	12	new	new	ADJ
fuelectenerg-480	115	13	linear	linear	ADJ
fuelectenerg-480	115	14	encoder	encoder	NOUN
fuelectenerg-480	115	15	-	-	PUNCT
fuelectenerg-480	115	16	like	like	ADJ
fuelectenerg-480	115	17	capacitive	capacitive	ADJ
fuelectenerg-480	115	18	displacement	displacement	ADJ
fuelectenerg-480	115	19	sensor	sensor	NOUN
fuelectenerg-480	115	20	"	"	PUNCT
fuelectenerg-480	115	21	,	,	PUNCT
fuelectenerg-480	115	22	measurement	measurement	NOUN
fuelectenerg-480	115	23	,	,	PUNCT
fuelectenerg-480	115	24	vol	vol	NOUN
fuelectenerg-480	115	25	.	.	PROPN
fuelectenerg-480	115	26	39	39	NUM
fuelectenerg-480	115	27	,	,	PUNCT
fuelectenerg-480	115	28	pp	pp	ADJ
fuelectenerg-480	115	29	.	.	PUNCT
fuelectenerg-480	116	1	481–489	481–489	NUM
fuelectenerg-480	116	2	,	,	PUNCT
fuelectenerg-480	116	3	july	july	PROPN
fuelectenerg-480	116	4	2006	2006	NUM
fuelectenerg-480	116	5	.	.	PUNCT
fuelectenerg-480	117	1	[	[	X
fuelectenerg-480	117	2	9	9	NUM
fuelectenerg-480	117	3	]	]	PUNCT
fuelectenerg-480	117	4	m.	m.	NOUN
fuelectenerg-480	117	5	kim	kim	PROPN
fuelectenerg-480	117	6	,	,	PUNCT
fuelectenerg-480	117	7	w.	w.	PROPN
fuelectenerg-480	117	8	moon	moon	PROPN
fuelectenerg-480	117	9	,	,	PUNCT
fuelectenerg-480	117	10	e.	e.	PROPN
fuelectenerg-480	117	11	yoon	yoon	PROPN
fuelectenerg-480	117	12	and	and	CCONJ
fuelectenerg-480	117	13	k	k	PROPN
fuelectenerg-480	117	14	r	r	PROPN
fuelectenerg-480	117	15	lee	lee	PROPN
fuelectenerg-480	117	16	,	,	PUNCT
fuelectenerg-480	117	17	"	"	PUNCT
fuelectenerg-480	117	18	a	a	DET
fuelectenerg-480	117	19	new	new	ADJ
fuelectenerg-480	117	20	capacitive	capacitive	ADJ
fuelectenerg-480	117	21	displacement	displacement	ADJ
fuelectenerg-480	117	22	sensor	sensor	NOUN
fuelectenerg-480	117	23	with	with	ADP
fuelectenerg-480	117	24	high	high	ADJ
fuelectenerg-480	117	25	accuracy	accuracy	NOUN
fuelectenerg-480	117	26	and	and	CCONJ
fuelectenerg-480	117	27	long	long	ADJ
fuelectenerg-480	117	28	-	-	PUNCT
fuelectenerg-480	117	29	range	range	NOUN
fuelectenerg-480	117	30	"	"	PUNCT
fuelectenerg-480	117	31	,	,	PUNCT
fuelectenerg-480	117	32	sensors	sensor	NOUN
fuelectenerg-480	117	33	and	and	CCONJ
fuelectenerg-480	117	34	actuators	actuator	NOUN
fuelectenerg-480	117	35	a	a	PRON
fuelectenerg-480	117	36	,	,	PUNCT
fuelectenerg-480	117	37	vol	vol	NOUN
fuelectenerg-480	117	38	.	.	NOUN
fuelectenerg-480	117	39	130	130	NUM
fuelectenerg-480	117	40	-	-	SYM
fuelectenerg-480	117	41	131	131	NUM
fuelectenerg-480	117	42	,	,	PUNCT
fuelectenerg-480	117	43	pp	pp	ADJ
fuelectenerg-480	117	44	.	.	PUNCT
fuelectenerg-480	118	1	135–141	135–141	NUM
fuelectenerg-480	118	2	,	,	PUNCT
fuelectenerg-480	118	3	august	august	PROPN
fuelectenerg-480	118	4	2006	2006	NUM
fuelectenerg-480	118	5	.	.	PUNCT
fuelectenerg-480	119	1	[	[	X
fuelectenerg-480	119	2	10	10	NUM
fuelectenerg-480	119	3	]	]	X
fuelectenerg-480	119	4	d.	d.	PROPN
fuelectenerg-480	119	5	kang	kang	PROPN
fuelectenerg-480	119	6	,	,	PUNCT
fuelectenerg-480	119	7	w.	w.	PROPN
fuelectenerg-480	119	8	lee	lee	PROPN
fuelectenerg-480	119	9	and	and	CCONJ
fuelectenerg-480	119	10	w.	w.	PROPN
fuelectenerg-480	119	11	moon	moon	PROPN
fuelectenerg-480	119	12	,	,	PUNCT
fuelectenerg-480	119	13	"	"	PUNCT
fuelectenerg-480	119	14	a	a	DET
fuelectenerg-480	119	15	technique	technique	NOUN
fuelectenerg-480	119	16	for	for	ADP
fuelectenerg-480	119	17	drift	drift	NOUN
fuelectenerg-480	119	18	compensation	compensation	NOUN
fuelectenerg-480	119	19	of	of	ADP
fuelectenerg-480	119	20	an	an	DET
fuelectenerg-480	119	21	area	area	NOUN
fuelectenerg-480	119	22	-	-	PUNCT
fuelectenerg-480	119	23	varying	vary	VERB
fuelectenerg-480	119	24	capacitive	capacitive	ADJ
fuelectenerg-480	119	25	displacement	displacement	ADJ
fuelectenerg-480	119	26	sensor	sensor	NOUN
fuelectenerg-480	119	27	for	for	ADP
fuelectenerg-480	119	28	nano	nano	NOUN
fuelectenerg-480	119	29	-	-	PUNCT
fuelectenerg-480	119	30	metrology	metrology	NOUN
fuelectenerg-480	119	31	"	"	PUNCT
fuelectenerg-480	119	32	,	,	PUNCT
fuelectenerg-480	119	33	in	in	ADP
fuelectenerg-480	119	34	proceedings	proceeding	NOUN
fuelectenerg-480	119	35	of	of	ADP
fuelectenerg-480	119	36	the	the	DET
fuelectenerg-480	119	37	eurosensors	eurosensor	NOUN
fuelectenerg-480	119	38	xxiv	xxiv	PROPN
fuelectenerg-480	119	39	,	,	PUNCT
fuelectenerg-480	119	40	procedia	procedia	PROPN
fuelectenerg-480	119	41	engineering	engineering	NOUN
fuelectenerg-480	119	42	5	5	NUM
fuelectenerg-480	119	43	,	,	PUNCT
fuelectenerg-480	119	44	september	september	PROPN
fuelectenerg-480	119	45	5	5	NUM
fuelectenerg-480	119	46	-	-	SYM
fuelectenerg-480	119	47	8	8	NUM
fuelectenerg-480	119	48	,	,	PUNCT
fuelectenerg-480	119	49	2010	2010	NUM
fuelectenerg-480	119	50	,	,	PUNCT
fuelectenerg-480	119	51	linz	linz	PROPN
fuelectenerg-480	119	52	,	,	PUNCT
fuelectenerg-480	119	53	austria	austria	PROPN
fuelectenerg-480	119	54	,	,	PUNCT
fuelectenerg-480	119	55	pp	pp	ADJ
fuelectenerg-480	119	56	.	.	PUNCT
fuelectenerg-480	120	1	412–415	412–415	NUM
fuelectenerg-480	120	2	.	.	PUNCT
fuelectenerg-480	121	1	[	[	X
fuelectenerg-480	121	2	11	11	NUM
fuelectenerg-480	121	3	]	]	X
fuelectenerg-480	121	4	f.	f.	PROPN
fuelectenerg-480	121	5	zhu	zhu	PROPN
fuelectenerg-480	121	6	,	,	PUNCT
fuelectenerg-480	121	7	j.	j.	PROPN
fuelectenerg-480	121	8	w.	w.	PROPN
fuelectenerg-480	121	9	spronck	spronck	PROPN
fuelectenerg-480	121	10	and	and	CCONJ
fuelectenerg-480	121	11	w.	w.	PROPN
fuelectenerg-480	121	12	c.	c.	PROPN
fuelectenerg-480	121	13	heerens	heeren	NOUN
fuelectenerg-480	121	14	,	,	PUNCT
fuelectenerg-480	121	15	"	"	PUNCT
fuelectenerg-480	121	16	a	a	DET
fuelectenerg-480	121	17	simple	simple	ADJ
fuelectenerg-480	121	18	capacitive	capacitive	ADJ
fuelectenerg-480	121	19	displacement	displacement	ADJ
fuelectenerg-480	121	20	sensor	sensor	NOUN
fuelectenerg-480	121	21	"	"	PUNCT
fuelectenerg-480	121	22	,	,	PUNCT
fuelectenerg-480	121	23	sensor	sensor	NOUN
fuelectenerg-480	121	24	and	and	CCONJ
fuelectenerg-480	121	25	actuator	actuator	NOUN
fuelectenerg-480	121	26	a	a	DET
fuelectenerg-480	121	27	,	,	PUNCT
fuelectenerg-480	121	28	vol	vol	NOUN
fuelectenerg-480	121	29	.	.	PROPN
fuelectenerg-480	121	30	25	25	NUM
fuelectenerg-480	121	31	,	,	PUNCT
fuelectenerg-480	121	32	issue	issue	NOUN
fuelectenerg-480	121	33	27	27	NUM
fuelectenerg-480	121	34	,	,	PUNCT
fuelectenerg-480	121	35	pp	pp	ADJ
fuelectenerg-480	121	36	.	.	PUNCT
fuelectenerg-480	122	1	265–269	265–269	NUM
fuelectenerg-480	122	2	,	,	PUNCT
fuelectenerg-480	122	3	1991	1991	NUM
fuelectenerg-480	122	4	.	.	PUNCT
fuelectenerg-480	123	1	[	[	X
fuelectenerg-480	123	2	12	12	NUM
fuelectenerg-480	123	3	]	]	X
fuelectenerg-480	123	4	g.	g.	PROPN
fuelectenerg-480	123	5	gao	gao	PROPN
fuelectenerg-480	123	6	,	,	PUNCT
fuelectenerg-480	123	7	y.	y.	PROPN
fuelectenerg-480	123	8	wang	wang	PROPN
fuelectenerg-480	123	9	,	,	PUNCT
fuelectenerg-480	123	10	s.	s.	PROPN
fuelectenerg-480	123	11	yan	yan	PROPN
fuelectenerg-480	123	12	and	and	CCONJ
fuelectenerg-480	123	13	y.	y.	PROPN
fuelectenerg-480	123	14	han	han	PROPN
fuelectenerg-480	123	15	,	,	PUNCT
fuelectenerg-480	123	16	"	"	PUNCT
fuelectenerg-480	123	17	design	design	NOUN
fuelectenerg-480	123	18	of	of	ADP
fuelectenerg-480	123	19	capacitive	capacitive	ADJ
fuelectenerg-480	123	20	displacement	displacement	ADJ
fuelectenerg-480	123	21	sensor	sensor	NOUN
fuelectenerg-480	123	22	and	and	CCONJ
fuelectenerg-480	123	23	measuring	measure	VERB
fuelectenerg-480	123	24	algorithm	algorithm	NOUN
fuelectenerg-480	123	25	based	base	VERB
fuelectenerg-480	123	26	on	on	ADP
fuelectenerg-480	123	27	modulated	modulate	VERB
fuelectenerg-480	123	28	differential	differential	ADJ
fuelectenerg-480	123	29	pulse	pulse	NOUN
fuelectenerg-480	123	30	width	width	NOUN
fuelectenerg-480	123	31	"	"	PUNCT
fuelectenerg-480	123	32	,	,	PUNCT
fuelectenerg-480	123	33	journal	journal	NOUN
fuelectenerg-480	123	34	of	of	ADP
fuelectenerg-480	123	35	chemical	chemical	NOUN
fuelectenerg-480	123	36	and	and	CCONJ
fuelectenerg-480	123	37	pharmaceutical	pharmaceutical	NOUN
fuelectenerg-480	123	38	research	research	NOUN
fuelectenerg-480	123	39	,	,	PUNCT
fuelectenerg-480	123	40	vol	vol	NOUN
fuelectenerg-480	123	41	.	.	PROPN
fuelectenerg-480	123	42	6	6	NUM
fuelectenerg-480	123	43	,	,	PUNCT
fuelectenerg-480	123	44	pp	pp	ADJ
fuelectenerg-480	123	45	.	.	PUNCT
fuelectenerg-480	123	46	704	704	NUM
fuelectenerg-480	123	47	-	-	SYM
fuelectenerg-480	123	48	711	711	NUM
fuelectenerg-480	123	49	,	,	PUNCT
fuelectenerg-480	123	50	2014	2014	NUM
fuelectenerg-480	123	51	.	.	PUNCT
fuelectenerg-480	123	52	296	296	NUM
fuelectenerg-480	123	53	m.	m.	NOUN
fuelectenerg-480	123	54	g.	g.	PROPN
fuelectenerg-480	123	55	kisić	kisić	PROPN
fuelectenerg-480	123	56	,	,	PUNCT
fuelectenerg-480	123	57	n.	n.	PROPN
fuelectenerg-480	123	58	v.	v.	ADP
fuelectenerg-480	123	59	blaž	blaž	NOUN
fuelectenerg-480	123	60	,	,	PUNCT
fuelectenerg-480	123	61	k.	k.	PROPN
fuelectenerg-480	123	62	b.	b.	PROPN
fuelectenerg-480	123	63	babković	babković	PROPN
fuelectenerg-480	123	64	,	,	PUNCT
fuelectenerg-480	123	65	et	et	PROPN
fuelectenerg-480	123	66	al	al	PROPN
fuelectenerg-480	123	67	.	.	PUNCT
fuelectenerg-480	124	1	[	[	X
fuelectenerg-480	124	2	13	13	NUM
fuelectenerg-480	124	3	]	]	PUNCT
fuelectenerg-480	124	4	m.	m.	NOUN
fuelectenerg-480	124	5	s.	s.	PROPN
fuelectenerg-480	124	6	damnjanovic	damnjanovic	PROPN
fuelectenerg-480	124	7	,	,	PUNCT
fuelectenerg-480	124	8	l.	l.	PROPN
fuelectenerg-480	124	9	d.	d.	PROPN
fuelectenerg-480	124	10	zivanov	zivanov	PROPN
fuelectenerg-480	124	11	,	,	PUNCT
fuelectenerg-480	124	12	l.	l.	PROPN
fuelectenerg-480	124	13	f.	f.	PROPN
fuelectenerg-480	124	14	nagy	nagy	PROPN
fuelectenerg-480	124	15	,	,	PUNCT
fuelectenerg-480	124	16	s.	s.	PROPN
fuelectenerg-480	124	17	m.	m.	PROPN
fuelectenerg-480	124	18	djuric	djuric	PROPN
fuelectenerg-480	124	19	and	and	CCONJ
fuelectenerg-480	124	20	b.	b.	PROPN
fuelectenerg-480	124	21	n.	n.	PROPN
fuelectenerg-480	124	22	biberdzic	biberdzic	PROPN
fuelectenerg-480	124	23	,	,	PUNCT
fuelectenerg-480	124	24	"	"	PUNCT
fuelectenerg-480	124	25	a	a	DET
fuelectenerg-480	124	26	novel	novel	ADJ
fuelectenerg-480	124	27	approach	approach	NOUN
fuelectenerg-480	124	28	to	to	ADP
fuelectenerg-480	124	29	extending	extend	VERB
fuelectenerg-480	124	30	the	the	DET
fuelectenerg-480	124	31	linearity	linearity	NOUN
fuelectenerg-480	124	32	range	range	NOUN
fuelectenerg-480	124	33	of	of	ADP
fuelectenerg-480	124	34	displacement	displacement	ADJ
fuelectenerg-480	124	35	inductive	inductive	ADJ
fuelectenerg-480	124	36	sensor	sensor	NOUN
fuelectenerg-480	124	37	"	"	PUNCT
fuelectenerg-480	124	38	,	,	PUNCT
fuelectenerg-480	124	39	ieee	ieee	NOUN
fuelectenerg-480	124	40	transaction	transaction	NOUN
fuelectenerg-480	124	41	on	on	ADP
fuelectenerg-480	124	42	magnetics	magnetic	NOUN
fuelectenerg-480	124	43	,	,	PUNCT
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fuelectenerg-480	124	45	.	.	PROPN
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fuelectenerg-480	124	47	,	,	PUNCT
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fuelectenerg-480	124	49	.	.	NOUN
fuelectenerg-480	124	50	11	11	NUM
fuelectenerg-480	124	51	,	,	PUNCT
fuelectenerg-480	124	52	pp	pp	ADJ
fuelectenerg-480	124	53	.	.	PUNCT
fuelectenerg-480	125	1	41234126	41234126	NUM
fuelectenerg-480	125	2	,	,	PUNCT
fuelectenerg-480	125	3	november	november	PROPN
fuelectenerg-480	125	4	2008	2008	NUM
fuelectenerg-480	125	5	.	.	PUNCT
fuelectenerg-480	126	1	[	[	X
fuelectenerg-480	126	2	14	14	NUM
fuelectenerg-480	126	3	]	]	X
fuelectenerg-480	126	4	v.	v.	CCONJ
fuelectenerg-480	126	5	stavrov	stavrov	PROPN
fuelectenerg-480	126	6	,	,	PUNCT
fuelectenerg-480	126	7	e.	e.	PROPN
fuelectenerg-480	126	8	tomerov	tomerov	PROPN
fuelectenerg-480	126	9	,	,	PUNCT
fuelectenerg-480	126	10	g.	g.	PROPN
fuelectenerg-480	126	11	stavreva	stavreva	PROPN
fuelectenerg-480	126	12	,	,	PUNCT
fuelectenerg-480	126	13	c.	c.	PROPN
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fuelectenerg-480	126	15	and	and	CCONJ
fuelectenerg-480	126	16	a.	a.	NOUN
fuelectenerg-480	126	17	shulev	shulev	NOUN
fuelectenerg-480	126	18	,	,	PUNCT
fuelectenerg-480	126	19	"	"	PUNCT
fuelectenerg-480	126	20	lateral	lateral	ADJ
fuelectenerg-480	126	21	displacement	displacement	ADJ
fuelectenerg-480	126	22	mems	mem	NOUN
fuelectenerg-480	126	23	sensor	sensor	NOUN
fuelectenerg-480	126	24	"	"	PUNCT
fuelectenerg-480	126	25	,	,	PUNCT
fuelectenerg-480	126	26	in	in	ADP
fuelectenerg-480	126	27	proceedings	proceeding	NOUN
fuelectenerg-480	126	28	of	of	ADP
fuelectenerg-480	126	29	the	the	DET
fuelectenerg-480	126	30	eurosensors	eurosensor	NOUN
fuelectenerg-480	126	31	xxiv	xxiv	PROPN
fuelectenerg-480	126	32	,	,	PUNCT
fuelectenerg-480	126	33	procedia	procedia	NOUN
fuelectenerg-480	126	34	engineering	engineering	NOUN
fuelectenerg-480	126	35	,	,	PUNCT
fuelectenerg-480	126	36	vol	vol	NOUN
fuelectenerg-480	126	37	.	.	PROPN
fuelectenerg-480	126	38	00	00	NUM
fuelectenerg-480	126	39	,	,	PUNCT
fuelectenerg-480	126	40	september	september	PROPN
fuelectenerg-480	126	41	5	5	NUM
fuelectenerg-480	126	42	-	-	SYM
fuelectenerg-480	126	43	8	8	NUM
fuelectenerg-480	126	44	,	,	PUNCT
fuelectenerg-480	126	45	2010	2010	NUM
fuelectenerg-480	126	46	,	,	PUNCT
fuelectenerg-480	126	47	linz	linz	PROPN
fuelectenerg-480	126	48	,	,	PUNCT
fuelectenerg-480	126	49	austria	austria	PROPN
fuelectenerg-480	126	50	,	,	PUNCT
fuelectenerg-480	126	51	2009	2009	NUM
fuelectenerg-480	126	52	,	,	PUNCT
fuelectenerg-480	126	53	pp	pp	ADJ
fuelectenerg-480	126	54	.	.	PUNCT
fuelectenerg-480	127	1	1	1	NUM
fuelectenerg-480	127	2	-	-	SYM
fuelectenerg-480	127	3	4	4	NUM
fuelectenerg-480	127	4	.	.	PUNCT
fuelectenerg-480	128	1	[	[	X
fuelectenerg-480	128	2	15	15	NUM
fuelectenerg-480	128	3	]	]	X
fuelectenerg-480	128	4	f.	f.	PROPN
fuelectenerg-480	128	5	mathieu	mathieu	PROPN
fuelectenerg-480	128	6	,	,	PUNCT
fuelectenerg-480	128	7	d.	d.	PROPN
fuelectenerg-480	128	8	saya	saya	PROPN
fuelectenerg-480	128	9	,	,	PUNCT
fuelectenerg-480	128	10	c.	c.	PROPN
fuelectenerg-480	128	11	bergaud	bergaud	PROPN
fuelectenerg-480	128	12	and	and	CCONJ
fuelectenerg-480	128	13	l.	l.	PROPN
fuelectenerg-480	128	14	nicu	nicu	PROPN
fuelectenerg-480	128	15	,	,	PUNCT
fuelectenerg-480	128	16	"	"	PUNCT
fuelectenerg-480	128	17	parallel	parallel	ADJ
fuelectenerg-480	128	18	detection	detection	NOUN
fuelectenerg-480	128	19	of	of	ADP
fuelectenerg-480	128	20	si	si	NOUN
fuelectenerg-480	128	21	-	-	PUNCT
fuelectenerg-480	128	22	based	base	VERB
fuelectenerg-480	128	23	microcantilevers	microcantilever	NOUN
fuelectenerg-480	128	24	resonant	resonant	VERB
fuelectenerg-480	128	25	frequencies	frequency	NOUN
fuelectenerg-480	128	26	using	use	VERB
fuelectenerg-480	128	27	piezoresistive	piezoresistive	ADJ
fuelectenerg-480	128	28	signals	signal	NOUN
fuelectenerg-480	128	29	downmixing	downmixe	VERB
fuelectenerg-480	128	30	scheme	scheme	NOUN
fuelectenerg-480	128	31	"	"	PUNCT
fuelectenerg-480	128	32	,	,	PUNCT
fuelectenerg-480	128	33	ieee	ieee	NOUN
fuelectenerg-480	128	34	sensors	sensor	NOUN
fuelectenerg-480	128	35	journal	journal	PROPN
fuelectenerg-480	128	36	,	,	PUNCT
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fuelectenerg-480	129	1	7	7	NUM
fuelectenerg-480	129	2	,	,	PUNCT
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fuelectenerg-480	129	4	.	.	NOUN
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fuelectenerg-480	129	6	,	,	PUNCT
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fuelectenerg-480	129	8	.	.	PUNCT
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fuelectenerg-480	130	2	-	-	SYM
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fuelectenerg-480	130	7	.	.	PUNCT
fuelectenerg-480	131	1	[	[	X
fuelectenerg-480	131	2	16	16	NUM
fuelectenerg-480	131	3	]	]	PUNCT
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fuelectenerg-480	131	20	for	for	ADP
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fuelectenerg-480	131	26	"	"	PUNCT
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fuelectenerg-480	131	30	journal	journal	PROPN
fuelectenerg-480	131	31	,	,	PUNCT
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fuelectenerg-480	131	37	.	.	NOUN
fuelectenerg-480	131	38	1	1	NUM
fuelectenerg-480	131	39	,	,	PUNCT
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fuelectenerg-480	131	41	.	.	PUNCT
fuelectenerg-480	132	1	96	96	NUM
fuelectenerg-480	132	2	-	-	SYM
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fuelectenerg-480	132	7	.	.	PUNCT
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fuelectenerg-480	133	3	]	]	PUNCT
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fuelectenerg-480	133	23	-	-	PUNCT
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fuelectenerg-480	133	25	cantilever	cantilever	NOUN
fuelectenerg-480	133	26	and	and	CCONJ
fuelectenerg-480	133	27	its	its	PRON
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fuelectenerg-480	133	29	integration	integration	NOUN
fuelectenerg-480	133	30	with	with	ADP
fuelectenerg-480	133	31	cmos	cmos	ADJ
fuelectenerg-480	133	32	circuits	circuit	NOUN
fuelectenerg-480	133	33	"	"	PUNCT
fuelectenerg-480	133	34	,	,	PUNCT
fuelectenerg-480	133	35	ieee	ieee	NOUN
fuelectenerg-480	133	36	sensors	sensor	NOUN
fuelectenerg-480	133	37	journal	journal	PROPN
fuelectenerg-480	133	38	,	,	PUNCT
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fuelectenerg-480	133	44	.	.	NOUN
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fuelectenerg-480	133	46	,	,	PUNCT
fuelectenerg-480	133	47	pp	pp	ADJ
fuelectenerg-480	133	48	.	.	PUNCT
fuelectenerg-480	133	49	489495	489495	NUM
fuelectenerg-480	133	50	,	,	PUNCT
fuelectenerg-480	133	51	april	april	PROPN
fuelectenerg-480	133	52	2007	2007	NUM
fuelectenerg-480	133	53	.	.	PUNCT
fuelectenerg-480	134	1	[	[	X
fuelectenerg-480	134	2	18	18	NUM
fuelectenerg-480	134	3	]	]	X
fuelectenerg-480	134	4	s.	s.	PROPN
fuelectenerg-480	134	5	m.	m.	PROPN
fuelectenerg-480	134	6	won	won	PROPN
fuelectenerg-480	134	7	,	,	PUNCT
fuelectenerg-480	134	8	h.-s	h.-s	PROPN
fuelectenerg-480	134	9	.	.	PUNCT
fuelectenerg-480	135	1	kim	kim	PROPN
fuelectenerg-480	135	2	,	,	PUNCT
fuelectenerg-480	135	3	n.	n.	PROPN
fuelectenerg-480	135	4	lu	lu	PROPN
fuelectenerg-480	135	5	,	,	PUNCT
fuelectenerg-480	135	6	d.-g	d.-g	PROPN
fuelectenerg-480	135	7	.	.	PUNCT
fuelectenerg-480	136	1	kim	kim	PROPN
fuelectenerg-480	136	2	,	,	PUNCT
fuelectenerg-480	136	3	c.	c.	PROPN
fuelectenerg-480	136	4	d.	d.	PROPN
fuelectenerg-480	136	5	solar	solar	PROPN
fuelectenerg-480	136	6	,	,	PUNCT
fuelectenerg-480	136	7	t.	t.	PROPN
fuelectenerg-480	136	8	duenas	duenas	PROPN
fuelectenerg-480	136	9	,	,	PUNCT
fuelectenerg-480	136	10	a.	a.	NOUN
fuelectenerg-480	136	11	ameen	ameen	PROPN
fuelectenerg-480	136	12	and	and	CCONJ
fuelectenerg-480	136	13	j.	j.	PROPN
fuelectenerg-480	136	14	a.	a.	PROPN
fuelectenerg-480	136	15	rogers	rogers	PROPN
fuelectenerg-480	136	16	,	,	PUNCT
fuelectenerg-480	136	17	"	"	PUNCT
fuelectenerg-480	136	18	piezoresistive	piezoresistive	ADJ
fuelectenerg-480	136	19	strain	strain	NOUN
fuelectenerg-480	136	20	sensors	sensor	NOUN
fuelectenerg-480	136	21	and	and	CCONJ
fuelectenerg-480	136	22	multiplexed	multiplexed	ADJ
fuelectenerg-480	136	23	arrays	array	NOUN
fuelectenerg-480	136	24	using	use	VERB
fuelectenerg-480	136	25	assemblies	assembly	NOUN
fuelectenerg-480	136	26	of	of	ADP
fuelectenerg-480	136	27	single	single	ADJ
fuelectenerg-480	136	28	-	-	PUNCT
fuelectenerg-480	136	29	crystalline	crystalline	NOUN
fuelectenerg-480	136	30	silicon	silicon	NOUN
fuelectenerg-480	136	31	nanoribbons	nanoribbon	NOUN
fuelectenerg-480	136	32	on	on	ADP
fuelectenerg-480	136	33	plastic	plastic	ADJ
fuelectenerg-480	136	34	substrates	substrate	NOUN
fuelectenerg-480	136	35	"	"	PUNCT
fuelectenerg-480	136	36	,	,	PUNCT
fuelectenerg-480	136	37	ieee	ieee	NOUN
fuelectenerg-480	136	38	transactions	transaction	NOUN
fuelectenerg-480	136	39	on	on	ADP
fuelectenerg-480	136	40	electron	electron	NOUN
fuelectenerg-480	136	41	devices	device	NOUN
fuelectenerg-480	136	42	,	,	PUNCT
fuelectenerg-480	136	43	vol	vol	NOUN
fuelectenerg-480	136	44	.	.	PROPN
fuelectenerg-480	137	1	58	58	NUM
fuelectenerg-480	137	2	,	,	PUNCT
fuelectenerg-480	137	3	no	no	INTJ
fuelectenerg-480	137	4	.	.	NOUN
fuelectenerg-480	137	5	11	11	NUM
fuelectenerg-480	137	6	,	,	PUNCT
fuelectenerg-480	137	7	pp	pp	ADJ
fuelectenerg-480	137	8	.	.	PUNCT
fuelectenerg-480	138	1	40744078	40744078	NUM
fuelectenerg-480	138	2	,	,	PUNCT
fuelectenerg-480	138	3	november	november	PROPN
fuelectenerg-480	138	4	2011	2011	NUM
fuelectenerg-480	138	5	.	.	PUNCT
fuelectenerg-480	139	1	[	[	X
fuelectenerg-480	139	2	19	19	NUM
fuelectenerg-480	139	3	]	]	X
fuelectenerg-480	139	4	m	m	PROPN
fuelectenerg-480	139	5	-	-	PROPN
fuelectenerg-480	139	6	y	y	PROPN
fuelectenerg-480	139	7	cheng	cheng	PROPN
fuelectenerg-480	139	8	,	,	PUNCT
fuelectenerg-480	139	9	x	x	PROPN
fuelectenerg-480	139	10	-	-	PROPN
fuelectenerg-480	139	11	h	h	ADJ
fuelectenerg-480	139	12	huang	huang	PROPN
fuelectenerg-480	139	13	,	,	PUNCT
fuelectenerg-480	139	14	c	c	PROPN
fuelectenerg-480	139	15	-	-	PUNCT
fuelectenerg-480	139	16	w	w	NOUN
fuelectenerg-480	139	17	ma	ma	PROPN
fuelectenerg-480	139	18	and	and	CCONJ
fuelectenerg-480	139	19	y	y	PROPN
fuelectenerg-480	139	20	-	-	PROPN
fuelectenerg-480	139	21	j	j	PROPN
fuelectenerg-480	139	22	yang	yang	PROPN
fuelectenerg-480	139	23	,	,	PUNCT
fuelectenerg-480	139	24	"	"	PUNCT
fuelectenerg-480	139	25	a	a	DET
fuelectenerg-480	139	26	flexible	flexible	ADJ
fuelectenerg-480	139	27	capacitive	capacitive	ADJ
fuelectenerg-480	139	28	tactile	tactile	ADJ
fuelectenerg-480	139	29	sensing	sense	VERB
fuelectenerg-480	139	30	array	array	NOUN
fuelectenerg-480	139	31	with	with	ADP
fuelectenerg-480	139	32	floating	float	VERB
fuelectenerg-480	139	33	electrodes	electrode	NOUN
fuelectenerg-480	139	34	"	"	PUNCT
fuelectenerg-480	139	35	,	,	PUNCT
fuelectenerg-480	139	36	journal	journal	NOUN
fuelectenerg-480	139	37	of	of	ADP
fuelectenerg-480	139	38	micromechanics	micromechanic	NOUN
fuelectenerg-480	139	39	and	and	CCONJ
fuelectenerg-480	139	40	microengineering	microengineering	NOUN
fuelectenerg-480	139	41	,	,	PUNCT
fuelectenerg-480	139	42	vol	vol	NOUN
fuelectenerg-480	139	43	.	.	PROPN
fuelectenerg-480	139	44	19	19	NUM
fuelectenerg-480	139	45	,	,	PUNCT
fuelectenerg-480	139	46	pp	pp	ADJ
fuelectenerg-480	139	47	.	.	PUNCT
fuelectenerg-480	140	1	1	1	NUM
fuelectenerg-480	140	2	-	-	SYM
fuelectenerg-480	140	3	10	10	NUM
fuelectenerg-480	140	4	,	,	PUNCT
fuelectenerg-480	140	5	2009	2009	NUM
fuelectenerg-480	140	6	.	.	PUNCT
fuelectenerg-480	141	1	[	[	X
fuelectenerg-480	141	2	20	20	NUM
fuelectenerg-480	141	3	]	]	SYM
fuelectenerg-480	141	4	c	c	PROPN
fuelectenerg-480	141	5	-	-	PUNCT
fuelectenerg-480	141	6	chu	chu	PROPN
fuelectenerg-480	141	7	chiang	chiang	PROPN
fuelectenerg-480	141	8	,	,	PUNCT
fuelectenerg-480	141	9	c	c	PROPN
fuelectenerg-480	141	10	-	-	PUNCT
fuelectenerg-480	141	11	c	c	NOUN
fuelectenerg-480	141	12	k.	k.	PROPN
fuelectenerg-480	141	13	lin	lin	PROPN
fuelectenerg-480	141	14	and	and	CCONJ
fuelectenerg-480	141	15	m	m	PROPN
fuelectenerg-480	141	16	-	-	PUNCT
fuelectenerg-480	141	17	s	s	PROPN
fuelectenerg-480	141	18	ju	ju	NOUN
fuelectenerg-480	141	19	,	,	PUNCT
fuelectenerg-480	141	20	"	"	PUNCT
fuelectenerg-480	141	21	an	an	DET
fuelectenerg-480	141	22	implantable	implantable	ADJ
fuelectenerg-480	141	23	capacitive	capacitive	ADJ
fuelectenerg-480	141	24	pressure	pressure	NOUN
fuelectenerg-480	141	25	sensor	sensor	NOUN
fuelectenerg-480	141	26	for	for	ADP
fuelectenerg-480	141	27	biomedical	biomedical	ADJ
fuelectenerg-480	141	28	applications	application	NOUN
fuelectenerg-480	141	29	"	"	PUNCT
fuelectenerg-480	141	30	,	,	PUNCT
fuelectenerg-480	141	31	sensors	sensor	NOUN
fuelectenerg-480	141	32	and	and	CCONJ
fuelectenerg-480	141	33	actuators	actuator	NOUN
fuelectenerg-480	141	34	a	a	PRON
fuelectenerg-480	141	35	,	,	PUNCT
fuelectenerg-480	141	36	vol	vol	NOUN
fuelectenerg-480	141	37	.	.	PROPN
fuelectenerg-480	141	38	134	134	NUM
fuelectenerg-480	141	39	,	,	PUNCT
fuelectenerg-480	141	40	pp	pp	ADJ
fuelectenerg-480	141	41	.	.	PUNCT
fuelectenerg-480	142	1	382–388	382–388	NUM
fuelectenerg-480	142	2	,	,	PUNCT
fuelectenerg-480	142	3	2007	2007	NUM
fuelectenerg-480	142	4	.	.	PUNCT
fuelectenerg-480	143	1	[	[	X
fuelectenerg-480	143	2	21	21	NUM
fuelectenerg-480	143	3	]	]	X
fuelectenerg-480	143	4	h	h	PROPN
fuelectenerg-480	143	5	-	-	PUNCT
fuelectenerg-480	143	6	j	j	PROPN
fuelectenerg-480	143	7	kwon	kwon	PROPN
fuelectenerg-480	143	8	,	,	PUNCT
fuelectenerg-480	143	9	j	j	PROPN
fuelectenerg-480	143	10	-	-	PROPN
fuelectenerg-480	143	11	h	h	PROPN
fuelectenerg-480	143	12	kim	kim	PROPN
fuelectenerg-480	143	13	and	and	CCONJ
fuelectenerg-480	143	14	w	w	PROPN
fuelectenerg-480	143	15	-	-	PUNCT
fuelectenerg-480	143	16	c	c	NOUN
fuelectenerg-480	143	17	choi	choi	NOUN
fuelectenerg-480	143	18	,	,	PUNCT
fuelectenerg-480	143	19	"	"	PUNCT
fuelectenerg-480	143	20	development	development	NOUN
fuelectenerg-480	143	21	of	of	ADP
fuelectenerg-480	143	22	a	a	DET
fuelectenerg-480	143	23	flexible	flexible	ADJ
fuelectenerg-480	143	24	three	three	NUM
fuelectenerg-480	143	25	-	-	PUNCT
fuelectenerg-480	143	26	axial	axial	ADJ
fuelectenerg-480	143	27	tactile	tactile	ADJ
fuelectenerg-480	143	28	sensor	sensor	NOUN
fuelectenerg-480	143	29	array	array	NOUN
fuelectenerg-480	143	30	for	for	ADP
fuelectenerg-480	143	31	a	a	DET
fuelectenerg-480	143	32	robotic	robotic	ADJ
fuelectenerg-480	143	33	finger	finger	NOUN
fuelectenerg-480	143	34	"	"	PUNCT
fuelectenerg-480	143	35	,	,	PUNCT
fuelectenerg-480	143	36	microsystem	microsystem	NOUN
fuelectenerg-480	143	37	technologies	technology	NOUN
fuelectenerg-480	143	38	,	,	PUNCT
fuelectenerg-480	143	39	vol	vol	NOUN
fuelectenerg-480	143	40	.	.	PROPN
fuelectenerg-480	143	41	17	17	NUM
fuelectenerg-480	143	42	,	,	PUNCT
fuelectenerg-480	143	43	pp	pp	ADJ
fuelectenerg-480	143	44	.	.	PUNCT
fuelectenerg-480	143	45	1721–1726	1721–1726	NUM
fuelectenerg-480	143	46	,	,	PUNCT
fuelectenerg-480	143	47	2011	2011	NUM
fuelectenerg-480	143	48	.	.	PUNCT
fuelectenerg-480	144	1	[	[	X
fuelectenerg-480	144	2	22	22	NUM
fuelectenerg-480	144	3	]	]	X
fuelectenerg-480	144	4	j.	j.	PROPN
fuelectenerg-480	144	5	engel	engel	PROPN
fuelectenerg-480	144	6	,	,	PUNCT
fuelectenerg-480	144	7	j.	j.	PROPN
fuelectenerg-480	144	8	chen	chen	PROPN
fuelectenerg-480	144	9	and	and	CCONJ
fuelectenerg-480	144	10	chang	chang	PROPN
fuelectenerg-480	144	11	liu	liu	PROPN
fuelectenerg-480	144	12	,	,	PUNCT
fuelectenerg-480	144	13	"	"	PUNCT
fuelectenerg-480	144	14	development	development	NOUN
fuelectenerg-480	144	15	of	of	ADP
fuelectenerg-480	144	16	polyimide	polyimide	ADJ
fuelectenerg-480	144	17	flexible	flexible	ADJ
fuelectenerg-480	144	18	tactile	tactile	ADJ
fuelectenerg-480	144	19	sensor	sensor	NOUN
fuelectenerg-480	144	20	skin	skin	NOUN
fuelectenerg-480	144	21	"	"	PUNCT
fuelectenerg-480	144	22	,	,	PUNCT
fuelectenerg-480	144	23	journal	journal	NOUN
fuelectenerg-480	144	24	of	of	ADP
fuelectenerg-480	144	25	micromechanics	micromechanic	NOUN
fuelectenerg-480	144	26	and	and	CCONJ
fuelectenerg-480	144	27	microengineering	microengineering	NOUN
fuelectenerg-480	144	28	,	,	PUNCT
fuelectenerg-480	144	29	vol	vol	NOUN
fuelectenerg-480	144	30	.	.	PROPN
fuelectenerg-480	144	31	13	13	NUM
fuelectenerg-480	144	32	,	,	PUNCT
fuelectenerg-480	144	33	pp	pp	ADJ
fuelectenerg-480	144	34	.	.	PUNCT
fuelectenerg-480	145	1	359–366	359–366	NUM
fuelectenerg-480	145	2	,	,	PUNCT
fuelectenerg-480	145	3	2003	2003	NUM
fuelectenerg-480	145	4	.	.	PUNCT
fuelectenerg-480	146	1	[	[	X
fuelectenerg-480	146	2	23	23	NUM
fuelectenerg-480	146	3	]	]	X
fuelectenerg-480	146	4	y	y	PROPN
fuelectenerg-480	146	5	-	-	PUNCT
fuelectenerg-480	146	6	j	j	PROPN
fuelectenerg-480	146	7	yang	yang	PROPN
fuelectenerg-480	146	8	,	,	PUNCT
fuelectenerg-480	146	9	m	m	PROPN
fuelectenerg-480	146	10	-	-	PROPN
fuelectenerg-480	146	11	y	y	PROPN
fuelectenerg-480	146	12	cheng	cheng	PROPN
fuelectenerg-480	146	13	and	and	CCONJ
fuelectenerg-480	146	14	x	x	PROPN
fuelectenerg-480	146	15	-	-	PROPN
fuelectenerg-480	146	16	h	h	PROPN
fuelectenerg-480	146	17	huang	huang	PROPN
fuelectenerg-480	146	18	,	,	PUNCT
fuelectenerg-480	146	19	"	"	PUNCT
fuelectenerg-480	146	20	fabrication	fabrication	NOUN
fuelectenerg-480	146	21	method	method	NOUN
fuelectenerg-480	146	22	of	of	ADP
fuelectenerg-480	146	23	a	a	DET
fuelectenerg-480	146	24	flexible	flexible	ADJ
fuelectenerg-480	146	25	capacitive	capacitive	ADJ
fuelectenerg-480	146	26	pressure	pressure	NOUN
fuelectenerg-480	146	27	sensor	sensor	NOUN
fuelectenerg-480	146	28	"	"	PUNCT
fuelectenerg-480	146	29	,	,	PUNCT
fuelectenerg-480	146	30	us	us	PROPN
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fuelectenerg-480	146	32	8,250,926	8,250,926	NUM
fuelectenerg-480	146	33	b2	b2	NOUN
fuelectenerg-480	146	34	,	,	PUNCT
fuelectenerg-480	146	35	august	august	PROPN
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fuelectenerg-480	146	37	,	,	PUNCT
fuelectenerg-480	146	38	2012	2012	NUM
fuelectenerg-480	146	39	.	.	PUNCT
fuelectenerg-480	147	1	[	[	X
fuelectenerg-480	147	2	24	24	NUM
fuelectenerg-480	147	3	]	]	X
fuelectenerg-480	147	4	h	h	PROPN
fuelectenerg-480	147	5	-	-	PUNCT
fuelectenerg-480	147	6	w	w	PROPN
fuelectenerg-480	147	7	jang	jang	PROPN
fuelectenerg-480	147	8	,	,	PUNCT
fuelectenerg-480	147	9	"	"	PUNCT
fuelectenerg-480	147	10	flexible	flexible	ADJ
fuelectenerg-480	147	11	display	display	NOUN
fuelectenerg-480	147	12	device	device	NOUN
fuelectenerg-480	147	13	having	have	VERB
fuelectenerg-480	147	14	touch	touch	NOUN
fuelectenerg-480	147	15	and	and	CCONJ
fuelectenerg-480	147	16	bending	bend	VERB
fuelectenerg-480	147	17	sensing	sense	VERB
fuelectenerg-480	147	18	function	function	NOUN
fuelectenerg-480	147	19	"	"	PUNCT
fuelectenerg-480	147	20	,	,	PUNCT
fuelectenerg-480	147	21	us	us	PROPN
fuelectenerg-480	147	22	patent	patent	NOUN
fuelectenerg-480	147	23	2014/0204285	2014/0204285	NUM
fuelectenerg-480	147	24	a1	a1	PROPN
fuelectenerg-480	147	25	,	,	PUNCT
fuelectenerg-480	147	26	july	july	PROPN
fuelectenerg-480	147	27	24	24	NUM
fuelectenerg-480	147	28	,	,	PUNCT
fuelectenerg-480	147	29	2014	2014	NUM
fuelectenerg-480	147	30	.	.	PUNCT
fuelectenerg-480	148	1	[	[	X
fuelectenerg-480	148	2	25	25	NUM
fuelectenerg-480	148	3	]	]	X
fuelectenerg-480	148	4	k	k	ADJ
fuelectenerg-480	148	5	-	-	ADJ
fuelectenerg-480	148	6	h	h	PROPN
fuelectenerg-480	148	7	shin	shin	NOUN
fuelectenerg-480	148	8	,	,	PUNCT
fuelectenerg-480	148	9	c	c	PROPN
fuelectenerg-480	148	10	-	-	PUNCT
fuelectenerg-480	148	11	y	y	PROPN
fuelectenerg-480	148	12	moon	moon	PROPN
fuelectenerg-480	148	13	and	and	CCONJ
fuelectenerg-480	148	14	y	y	PROPN
fuelectenerg-480	148	15	-	-	PROPN
fuelectenerg-480	148	16	j	j	PROPN
fuelectenerg-480	148	17	kim	kim	PROPN
fuelectenerg-480	148	18	,	,	PUNCT
fuelectenerg-480	148	19	"	"	PUNCT
fuelectenerg-480	148	20	flexible	flexible	ADJ
fuelectenerg-480	148	21	device	device	NOUN
fuelectenerg-480	148	22	,	,	PUNCT
fuelectenerg-480	148	23	flexible	flexible	ADJ
fuelectenerg-480	148	24	pressure	pressure	NOUN
fuelectenerg-480	148	25	sensor	sensor	NOUN
fuelectenerg-480	148	26	"	"	PUNCT
fuelectenerg-480	148	27	,	,	PUNCT
fuelectenerg-480	148	28	us	us	PROPN
fuelectenerg-480	148	29	patent	patent	NOUN
fuelectenerg-480	148	30	8,107,248	8,107,248	NUM
fuelectenerg-480	148	31	b2	b2	NOUN
fuelectenerg-480	148	32	,	,	PUNCT
fuelectenerg-480	148	33	january	january	PROPN
fuelectenerg-480	148	34	31	31	NUM
fuelectenerg-480	148	35	,	,	PUNCT
fuelectenerg-480	148	36	2012	2012	NUM
fuelectenerg-480	148	37	.	.	PUNCT
fuelectenerg-480	149	1	[	[	X
fuelectenerg-480	149	2	26	26	NUM
fuelectenerg-480	149	3	]	]	PUNCT
fuelectenerg-480	149	4	a.	a.	NOUN
fuelectenerg-480	149	5	baldi	baldi	PROPN
fuelectenerg-480	149	6	,	,	PUNCT
fuelectenerg-480	149	7	w.	w.	NOUN
fuelectenerg-480	149	8	choi	choi	PROPN
fuelectenerg-480	149	9	and	and	CCONJ
fuelectenerg-480	149	10	b.	b.	PROPN
fuelectenerg-480	149	11	ziaie	ziaie	PROPN
fuelectenerg-480	149	12	,	,	PUNCT
fuelectenerg-480	149	13	"	"	PUNCT
fuelectenerg-480	149	14	a	a	DET
fuelectenerg-480	149	15	self	self	NOUN
fuelectenerg-480	149	16	-	-	PUNCT
fuelectenerg-480	149	17	resonant	resonant	NOUN
fuelectenerg-480	149	18	frequency	frequency	NOUN
fuelectenerg-480	149	19	-	-	PUNCT
fuelectenerg-480	149	20	modulated	modulate	VERB
fuelectenerg-480	149	21	micromachined	micromachine	VERB
fuelectenerg-480	149	22	passive	passive	ADJ
fuelectenerg-480	149	23	pressure	pressure	NOUN
fuelectenerg-480	149	24	transensor	transensor	NOUN
fuelectenerg-480	149	25	"	"	PUNCT
fuelectenerg-480	149	26	,	,	PUNCT
fuelectenerg-480	149	27	ieee	ieee	NOUN
fuelectenerg-480	149	28	sensors	sensor	NOUN
fuelectenerg-480	149	29	journal	journal	PROPN
fuelectenerg-480	149	30	,	,	PUNCT
fuelectenerg-480	149	31	vol	vol	NOUN
fuelectenerg-480	149	32	.	.	PROPN
fuelectenerg-480	149	33	3	3	NUM
fuelectenerg-480	149	34	,	,	PUNCT
fuelectenerg-480	149	35	pp	pp	ADJ
fuelectenerg-480	149	36	.	.	PUNCT
fuelectenerg-480	149	37	728733	728733	NUM
fuelectenerg-480	149	38	,	,	PUNCT
fuelectenerg-480	149	39	december	december	PROPN
fuelectenerg-480	149	40	2003	2003	NUM
fuelectenerg-480	149	41	.	.	PUNCT
fuelectenerg-480	150	1	[	[	X
fuelectenerg-480	150	2	27	27	NUM
fuelectenerg-480	150	3	]	]	X
fuelectenerg-480	150	4	n.	n.	NOUN
fuelectenerg-480	150	5	misron	misron	PROPN
fuelectenerg-480	150	6	,	,	PUNCT
fuelectenerg-480	150	7	l.	l.	PROPN
fuelectenerg-480	150	8	q.	q.	PROPN
fuelectenerg-480	150	9	ying	ying	PROPN
fuelectenerg-480	150	10	,	,	PUNCT
fuelectenerg-480	150	11	r.	r.	PROPN
fuelectenerg-480	150	12	n.	n.	PROPN
fuelectenerg-480	150	13	firdaus	firdaus	PROPN
fuelectenerg-480	150	14	,	,	PUNCT
fuelectenerg-480	150	15	n.	n.	PROPN
fuelectenerg-480	150	16	abdullah	abdullah	PROPN
fuelectenerg-480	150	17	,	,	PUNCT
fuelectenerg-480	150	18	n.	n.	PROPN
fuelectenerg-480	150	19	f.	f.	PROPN
fuelectenerg-480	150	20	mailah	mailah	PROPN
fuelectenerg-480	150	21	and	and	CCONJ
fuelectenerg-480	150	22	hiroyuki	hiroyuki	PROPN
fuelectenerg-480	150	23	wakiwaka	wakiwaka	ADV
fuelectenerg-480	150	24	,	,	PUNCT
fuelectenerg-480	150	25	"	"	PUNCT
fuelectenerg-480	150	26	effect	effect	NOUN
fuelectenerg-480	150	27	of	of	ADP
fuelectenerg-480	150	28	inductive	inductive	ADJ
fuelectenerg-480	150	29	coil	coil	NOUN
fuelectenerg-480	150	30	shape	shape	NOUN
fuelectenerg-480	150	31	on	on	ADP
fuelectenerg-480	150	32	sensing	sense	VERB
fuelectenerg-480	150	33	performance	performance	NOUN
fuelectenerg-480	150	34	of	of	ADP
fuelectenerg-480	150	35	linear	linear	ADJ
fuelectenerg-480	150	36	displacement	displacement	ADJ
fuelectenerg-480	150	37	sensor	sensor	NOUN
fuelectenerg-480	150	38	using	use	VERB
fuelectenerg-480	150	39	thin	thin	ADJ
fuelectenerg-480	150	40	inductive	inductive	ADJ
fuelectenerg-480	150	41	coil	coil	NOUN
fuelectenerg-480	150	42	and	and	CCONJ
fuelectenerg-480	150	43	pattern	pattern	NOUN
fuelectenerg-480	150	44	guide	guide	NOUN
fuelectenerg-480	150	45	"	"	PUNCT
fuelectenerg-480	150	46	,	,	PUNCT
fuelectenerg-480	150	47	sensors	sensor	NOUN
fuelectenerg-480	150	48	,	,	PUNCT
fuelectenerg-480	150	49	vol	vol	NOUN
fuelectenerg-480	150	50	.	.	PROPN
fuelectenerg-480	150	51	11	11	NUM
fuelectenerg-480	150	52	,	,	PUNCT
fuelectenerg-480	150	53	pp	pp	ADJ
fuelectenerg-480	150	54	.	.	PUNCT
fuelectenerg-480	151	1	10522	10522	NUM
fuelectenerg-480	151	2	-	-	SYM
fuelectenerg-480	151	3	10533	10533	NUM
fuelectenerg-480	151	4	,	,	PUNCT
fuelectenerg-480	151	5	november	november	PROPN
fuelectenerg-480	151	6	2011	2011	NUM
fuelectenerg-480	151	7	.	.	PUNCT
fuelectenerg-480	152	1	[	[	X
fuelectenerg-480	152	2	28	28	NUM
fuelectenerg-480	152	3	]	]	X
fuelectenerg-480	152	4	m.	m.	NOUN
fuelectenerg-480	152	5	g.	g.	PROPN
fuelectenerg-480	152	6	kisic	kisic	PROPN
fuelectenerg-480	152	7	,	,	PUNCT
fuelectenerg-480	152	8	n.	n.	PROPN
fuelectenerg-480	152	9	v.	v.	ADP
fuelectenerg-480	152	10	blaz	blaz	PROPN
fuelectenerg-480	152	11	,	,	PUNCT
fuelectenerg-480	152	12	k.	k.	PROPN
fuelectenerg-480	152	13	b.	b.	PROPN
fuelectenerg-480	152	14	babkovic	babkovic	PROPN
fuelectenerg-480	152	15	,	,	PUNCT
fuelectenerg-480	152	16	a.	a.	NOUN
fuelectenerg-480	152	17	m.	m.	PROPN
fuelectenerg-480	152	18	maric	maric	PROPN
fuelectenerg-480	152	19	,	,	PUNCT
fuelectenerg-480	152	20	g.	g.	PROPN
fuelectenerg-480	152	21	j.	j.	PROPN
fuelectenerg-480	152	22	radosavljevic	radosavljevic	PROPN
fuelectenerg-480	152	23	,	,	PUNCT
fuelectenerg-480	152	24	l.	l.	PROPN
fuelectenerg-480	152	25	d.	d.	PROPN
fuelectenerg-480	152	26	zivanov	zivanov	PROPN
fuelectenerg-480	152	27	and	and	CCONJ
fuelectenerg-480	152	28	m.	m.	PROPN
fuelectenerg-480	152	29	s.	s.	PROPN
fuelectenerg-480	152	30	damnjanovic	damnjanovic	PROPN
fuelectenerg-480	152	31	,	,	PUNCT
fuelectenerg-480	152	32	"	"	PUNCT
fuelectenerg-480	152	33	passive	passive	ADJ
fuelectenerg-480	152	34	wireless	wireless	ADJ
fuelectenerg-480	152	35	sensor	sensor	NOUN
fuelectenerg-480	152	36	for	for	ADP
fuelectenerg-480	152	37	force	force	NOUN
fuelectenerg-480	152	38	measurements	measurement	NOUN
fuelectenerg-480	152	39	"	"	PUNCT
fuelectenerg-480	152	40	,	,	PUNCT
fuelectenerg-480	152	41	ieee	ieee	NOUN
fuelectenerg-480	152	42	transactions	transaction	NOUN
fuelectenerg-480	152	43	on	on	ADP
fuelectenerg-480	152	44	magnetics	magnetic	NOUN
fuelectenerg-480	152	45	,	,	PUNCT
fuelectenerg-480	152	46	vol	vol	NOUN
fuelectenerg-480	152	47	.	.	PROPN
fuelectenerg-480	152	48	51	51	NUM
fuelectenerg-480	152	49	,	,	PUNCT
fuelectenerg-480	152	50	issue	issue	NOUN
fuelectenerg-480	152	51	1	1	NUM
fuelectenerg-480	152	52	,	,	PUNCT
fuelectenerg-480	152	53	doi	doi	X
fuelectenerg-480	152	54	10.1109	10.1109	NUM
fuelectenerg-480	152	55	/	/	SYM
fuelectenerg-480	152	56	tmag.2014.2359334	tmag.2014.2359334	NOUN
fuelectenerg-480	152	57	,	,	PUNCT
fuelectenerg-480	152	58	in	in	ADP
fuelectenerg-480	152	59	press	press	NOUN
fuelectenerg-480	152	60	.	.	PUNCT
fuelectenerg-480	153	1	[	[	X
fuelectenerg-480	153	2	29	29	NUM
fuelectenerg-480	153	3	]	]	X
fuelectenerg-480	153	4	m.	m.	NOUN
fuelectenerg-480	153	5	g.	g.	PROPN
fuelectenerg-480	153	6	kisić	kisić	PROPN
fuelectenerg-480	153	7	,	,	PUNCT
fuelectenerg-480	153	8	n.	n.	PROPN
fuelectenerg-480	153	9	v.	v.	ADP
fuelectenerg-480	153	10	blaž	blaž	NOUN
fuelectenerg-480	153	11	,	,	PUNCT
fuelectenerg-480	153	12	b.	b.	PROPN
fuelectenerg-480	153	13	dakić	dakić	PROPN
fuelectenerg-480	153	14	,	,	PUNCT
fuelectenerg-480	153	15	a.	a.	PROPN
fuelectenerg-480	153	16	marić	marić	PROPN
fuelectenerg-480	153	17	,	,	PUNCT
fuelectenerg-480	153	18	g.	g.	PROPN
fuelectenerg-480	153	19	j.	j.	PROPN
fuelectenerg-480	153	20	radosavljević	radosavljević	PROPN
fuelectenerg-480	153	21	,	,	PUNCT
fuelectenerg-480	153	22	lj	lj	PROPN
fuelectenerg-480	153	23	.	.	PUNCT
fuelectenerg-480	153	24	d.	d.	PROPN
fuelectenerg-480	153	25	živanov	živanov	PROPN
fuelectenerg-480	153	26	and	and	CCONJ
fuelectenerg-480	153	27	m.	m.	PROPN
fuelectenerg-480	153	28	s.	s.	PROPN
fuelectenerg-480	153	29	damnjanović	damnjanović	PROPN
fuelectenerg-480	153	30	,	,	PUNCT
fuelectenerg-480	153	31	"	"	PUNCT
fuelectenerg-480	153	32	a	a	DET
fuelectenerg-480	153	33	flexible	flexible	ADJ
fuelectenerg-480	153	34	polyimide	polyimide	NOUN
fuelectenerg-480	153	35	based	base	VERB
fuelectenerg-480	153	36	device	device	NOUN
fuelectenerg-480	153	37	for	for	ADP
fuelectenerg-480	153	38	displacement	displacement	ADJ
fuelectenerg-480	153	39	sensing	sensing	NOUN
fuelectenerg-480	153	40	"	"	PUNCT
fuelectenerg-480	153	41	,	,	PUNCT
fuelectenerg-480	153	42	in	in	ADP
fuelectenerg-480	153	43	proceedings	proceeding	NOUN
fuelectenerg-480	153	44	of	of	ADP
fuelectenerg-480	153	45	the	the	DET
fuelectenerg-480	153	46	29th	29th	ADJ
fuelectenerg-480	153	47	international	international	ADJ
fuelectenerg-480	153	48	conference	conference	NOUN
fuelectenerg-480	153	49	on	on	ADP
fuelectenerg-480	153	50	microelectronics	microelectronic	NOUN
fuelectenerg-480	153	51	(	(	PUNCT
fuelectenerg-480	153	52	miel	miel	PROPN
fuelectenerg-480	153	53	2014	2014	NUM
fuelectenerg-480	153	54	)	)	PUNCT
fuelectenerg-480	153	55	,	,	PUNCT
fuelectenerg-480	153	56	belgrade	belgrade	PROPN
fuelectenerg-480	153	57	,	,	PUNCT
fuelectenerg-480	153	58	serbia	serbia	PROPN
fuelectenerg-480	153	59	,	,	PUNCT
fuelectenerg-480	153	60	12	12	NUM
fuelectenerg-480	153	61	-	-	SYM
fuelectenerg-480	153	62	15	15	NUM
fuelectenerg-480	153	63	may	may	NOUN
fuelectenerg-480	153	64	,	,	PUNCT
fuelectenerg-480	153	65	2014	2014	NUM
fuelectenerg-480	153	66	,	,	PUNCT
fuelectenerg-480	153	67	pp	pp	ADJ
fuelectenerg-480	153	68	.	.	PUNCT
fuelectenerg-480	154	1	1	1	NUM
fuelectenerg-480	154	2	-	-	SYM
fuelectenerg-480	154	3	4	4	NUM
fuelectenerg-480	154	4	.	.	PUNCT
fuelectenerg-480	155	1	[	[	X
fuelectenerg-480	155	2	30	30	NUM
fuelectenerg-480	155	3	]	]	X
fuelectenerg-480	155	4	gts	gts	NOUN
fuelectenerg-480	155	5	flexible	flexible	PROPN
fuelectenerg-480	155	6	materials	materials	PROPN
fuelectenerg-480	155	7	ltd	ltd	PROPN
fuelectenerg-480	155	8	,	,	PUNCT
fuelectenerg-480	155	9	available	available	ADJ
fuelectenerg-480	155	10	at	at	ADP
fuelectenerg-480	155	11	:	:	PUNCT
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fuelectenerg-480	155	13	.	.	PUNCT
fuelectenerg-480	156	1	[	[	X
fuelectenerg-480	156	2	31	31	NUM
fuelectenerg-480	156	3	]	]	X
fuelectenerg-480	156	4	n.	n.	NOUN
fuelectenerg-480	156	5	lobontiu	lobontiu	PROPN
fuelectenerg-480	156	6	and	and	CCONJ
fuelectenerg-480	156	7	e.	e.	PROPN
fuelectenerg-480	156	8	garcia	garcia	PROPN
fuelectenerg-480	156	9	,	,	PUNCT
fuelectenerg-480	156	10	mechanics	mechanic	NOUN
fuelectenerg-480	156	11	of	of	ADP
fuelectenerg-480	156	12	microelectromechanical	microelectromechanical	ADJ
fuelectenerg-480	156	13	systems	system	NOUN
fuelectenerg-480	156	14	.	.	PUNCT
fuelectenerg-480	157	1	springer	springer	NOUN
fuelectenerg-480	157	2	science	science	PROPN
fuelectenerg-480	157	3	&	&	CCONJ
fuelectenerg-480	157	4	business	business	NOUN
fuelectenerg-480	157	5	media	medium	NOUN
fuelectenerg-480	157	6	,	,	PUNCT
fuelectenerg-480	157	7	2005	2005	NUM
fuelectenerg-480	157	8	,	,	PUNCT
fuelectenerg-480	157	9	chapter	chapter	NOUN
fuelectenerg-480	157	10	6	6	NUM
fuelectenerg-480	157	11	,	,	PUNCT
fuelectenerg-480	157	12	pp	pp	ADJ
fuelectenerg-480	157	13	.	.	PUNCT
fuelectenerg-480	157	14	364	364	NUM
fuelectenerg-480	157	15	.	.	PUNCT
fuelectenerg-480	158	1	[	[	X
fuelectenerg-480	158	2	32	32	NUM
fuelectenerg-480	158	3	]	]	PUNCT
fuelectenerg-480	158	4	a.	a.	PROPN
fuelectenerg-480	158	5	k.	k.	PROPN
fuelectenerg-480	158	6	kaw	kaw	PROPN
fuelectenerg-480	158	7	,	,	PUNCT
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fuelectenerg-480	158	9	of	of	ADP
fuelectenerg-480	158	10	composite	composite	ADJ
fuelectenerg-480	158	11	materials	material	NOUN
fuelectenerg-480	158	12	.	.	PUNCT
fuelectenerg-480	159	1	second	second	ADJ
fuelectenerg-480	159	2	edition	edition	NOUN
fuelectenerg-480	159	3	,	,	PUNCT
fuelectenerg-480	159	4	crc	crc	NOUN
fuelectenerg-480	159	5	press	press	NOUN
fuelectenerg-480	159	6	,	,	PUNCT
fuelectenerg-480	159	7	technology	technology	NOUN
fuelectenerg-480	159	8	&	&	CCONJ
fuelectenerg-480	159	9	engineering	engineering	PROPN
fuelectenerg-480	159	10	,	,	PUNCT
fuelectenerg-480	159	11	november	november	PROPN
fuelectenerg-480	159	12	2005	2005	NUM
fuelectenerg-480	159	13	,	,	PUNCT
fuelectenerg-480	159	14	chapter	chapter	NOUN
fuelectenerg-480	159	15	1	1	NUM
fuelectenerg-480	159	16	,	,	PUNCT
fuelectenerg-480	159	17	pp	pp	ADJ
fuelectenerg-480	159	18	.	.	PUNCT
fuelectenerg-480	160	1	6	6	X
fuelectenerg-480	160	2	.	.	PUNCT
fuelectenerg-480	161	1	[	[	X
fuelectenerg-480	161	2	33	33	NUM
fuelectenerg-480	161	3	]	]	X
fuelectenerg-480	161	4	n.	n.	NOUN
fuelectenerg-480	161	5	blaž	blaž	NOUN
fuelectenerg-480	161	6	,	,	PUNCT
fuelectenerg-480	161	7	a.	a.	PROPN
fuelectenerg-480	161	8	marić	marić	PROPN
fuelectenerg-480	161	9	,	,	PUNCT
fuelectenerg-480	161	10	i.	i.	PROPN
fuelectenerg-480	161	11	atassi	atassi	PROPN
fuelectenerg-480	161	12	,	,	PUNCT
fuelectenerg-480	161	13	g.	g.	PROPN
fuelectenerg-480	161	14	radosavljević	radosavljević	PROPN
fuelectenerg-480	161	15	,	,	PUNCT
fuelectenerg-480	161	16	lj	lj	PROPN
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fuelectenerg-480	161	19	,	,	PUNCT
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fuelectenerg-480	161	23	w.	w.	PROPN
fuelectenerg-480	161	24	smetana	smetana	PROPN
fuelectenerg-480	161	25	,	,	PUNCT
fuelectenerg-480	161	26	"	"	PUNCT
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fuelectenerg-480	161	29	changes	change	NOUN
fuelectenerg-480	161	30	of	of	ADP
fuelectenerg-480	161	31	ferritic	ferritic	ADJ
fuelectenerg-480	161	32	ltcc	ltcc	ADJ
fuelectenerg-480	161	33	samples	sample	NOUN
fuelectenerg-480	161	34	with	with	ADP
fuelectenerg-480	161	35	variation	variation	NOUN
fuelectenerg-480	161	36	of	of	ADP
fuelectenerg-480	161	37	sintering	sinter	VERB
fuelectenerg-480	161	38	temperatures	temperature	NOUN
fuelectenerg-480	161	39	"	"	PUNCT
fuelectenerg-480	161	40	,	,	PUNCT
fuelectenerg-480	161	41	ieee	ieee	NOUN
fuelectenerg-480	161	42	transaction	transaction	NOUN
fuelectenerg-480	161	43	on	on	ADP
fuelectenerg-480	161	44	magnetics	magnetic	NOUN
fuelectenerg-480	161	45	,	,	PUNCT
fuelectenerg-480	161	46	vol	vol	NOUN
fuelectenerg-480	161	47	.	.	PROPN
fuelectenerg-480	161	48	48	48	NUM
fuelectenerg-480	161	49	,	,	PUNCT
fuelectenerg-480	161	50	pp	pp	ADJ
fuelectenerg-480	161	51	.	.	PUNCT
fuelectenerg-480	161	52	1563	1563	NUM
fuelectenerg-480	161	53	-	-	SYM
fuelectenerg-480	161	54	1566	1566	NUM
fuelectenerg-480	161	55	,	,	PUNCT
fuelectenerg-480	161	56	2012	2012	NUM
fuelectenerg-480	161	57	.	.	PUNCT
fuelectenerg-480	162	1	[	[	X
fuelectenerg-480	162	2	34	34	NUM
fuelectenerg-480	162	3	]	]	X
fuelectenerg-480	162	4	o.	o.	PROPN
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fuelectenerg-480	162	12	,	,	PUNCT
fuelectenerg-480	162	13	"	"	PUNCT
fuelectenerg-480	162	14	a	a	DET
fuelectenerg-480	162	15	wireless	wireless	ADJ
fuelectenerg-480	162	16	batch	batch	NOUN
fuelectenerg-480	162	17	sealed	seal	VERB
fuelectenerg-480	162	18	absolute	absolute	ADJ
fuelectenerg-480	162	19	capacitive	capacitive	ADJ
fuelectenerg-480	162	20	pressure	pressure	NOUN
fuelectenerg-480	162	21	sensor	sensor	NOUN
fuelectenerg-480	162	22	"	"	PUNCT
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fuelectenerg-480	162	24	sensors	sensor	NOUN
fuelectenerg-480	162	25	and	and	CCONJ
fuelectenerg-480	162	26	actuators	actuator	NOUN
fuelectenerg-480	162	27	a	a	PRON
fuelectenerg-480	162	28	,	,	PUNCT
fuelectenerg-480	162	29	vol	vol	NOUN
fuelectenerg-480	162	30	.	.	PROPN
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fuelectenerg-480	162	32	,	,	PUNCT
fuelectenerg-480	162	33	pp	pp	ADJ
fuelectenerg-480	162	34	.	.	PUNCT
fuelectenerg-480	163	1	29–38	29–38	NUM
fuelectenerg-480	163	2	,	,	PUNCT
fuelectenerg-480	163	3	2001	2001	NUM
fuelectenerg-480	163	4	.	.	PUNCT
fuelectenerg-480	164	1	[	[	X
fuelectenerg-480	164	2	35	35	NUM
fuelectenerg-480	164	3	]	]	PUNCT
fuelectenerg-480	164	4	s.	s.	PROPN
fuelectenerg-480	164	5	s.	s.	PROPN
fuelectenerg-480	164	6	mohan	mohan	PROPN
fuelectenerg-480	164	7	,	,	PUNCT
fuelectenerg-480	164	8	m.	m.	NOUN
fuelectenerg-480	164	9	m.	m.	PROPN
fuelectenerg-480	164	10	hershenson	hershenson	PROPN
fuelectenerg-480	164	11	,	,	PUNCT
fuelectenerg-480	164	12	s.	s.	PROPN
fuelectenerg-480	164	13	p.	p.	PROPN
fuelectenerg-480	164	14	boyd	boyd	PROPN
fuelectenerg-480	164	15	and	and	CCONJ
fuelectenerg-480	164	16	t.	t.	PROPN
fuelectenerg-480	164	17	h.	h.	PROPN
fuelectenerg-480	164	18	lee	lee	PROPN
fuelectenerg-480	164	19	,	,	PUNCT
fuelectenerg-480	164	20	"	"	PUNCT
fuelectenerg-480	164	21	simple	simple	ADJ
fuelectenerg-480	164	22	accurate	accurate	ADJ
fuelectenerg-480	164	23	expressions	expression	NOUN
fuelectenerg-480	164	24	for	for	ADP
fuelectenerg-480	164	25	planar	planar	ADJ
fuelectenerg-480	164	26	spiral	spiral	ADJ
fuelectenerg-480	164	27	inductances	inductance	NOUN
fuelectenerg-480	164	28	"	"	PUNCT
fuelectenerg-480	164	29	,	,	PUNCT
fuelectenerg-480	164	30	ieee	ieee	NOUN
fuelectenerg-480	164	31	journal	journal	NOUN
fuelectenerg-480	164	32	of	of	ADP
fuelectenerg-480	164	33	solid	solid	ADJ
fuelectenerg-480	164	34	-	-	PUNCT
fuelectenerg-480	164	35	state	state	NOUN
fuelectenerg-480	164	36	circuits	circuit	NOUN
fuelectenerg-480	164	37	,	,	PUNCT
fuelectenerg-480	164	38	vol	vol	NOUN
fuelectenerg-480	164	39	.	.	PROPN
fuelectenerg-480	165	1	34	34	NUM
fuelectenerg-480	165	2	,	,	PUNCT
fuelectenerg-480	165	3	pp	pp	ADJ
fuelectenerg-480	165	4	.	.	PROPN
fuelectenerg-480	166	1	14191424	14191424	NUM
fuelectenerg-480	166	2	,	,	PUNCT
fuelectenerg-480	166	3	1999	1999	NUM
fuelectenerg-480	166	4	.	.	PUNCT
fuelectenerg-480	167	1	[	[	X
fuelectenerg-480	167	2	36	36	NUM
fuelectenerg-480	167	3	]	]	X
fuelectenerg-480	167	4	cst	cst	PROPN
fuelectenerg-480	167	5	microwave	microwave	PROPN
fuelectenerg-480	167	6	studio	studio	PROPN
fuelectenerg-480	167	7	suite	suite	NOUN
fuelectenerg-480	167	8	,	,	PUNCT
fuelectenerg-480	167	9	computer	computer	NOUN
fuelectenerg-480	167	10	simulation	simulation	NOUN
fuelectenerg-480	167	11	technology	technology	NOUN
fuelectenerg-480	167	12	,	,	PUNCT
fuelectenerg-480	167	13	www.cst.com	www.cst.com	PROPN
fuelectenerg-480	167	14	.	.	PUNCT