id	sid	tid	token	lemma	pos
fuelectenerg-6011	1	1	instruction	instruction	NOUN
fuelectenerg-6011	1	2	facta	facta	PROPN
fuelectenerg-6011	1	3	universitatis	universitatis	PROPN
fuelectenerg-6011	1	4	series	series	NOUN
fuelectenerg-6011	1	5	:	:	PUNCT
fuelectenerg-6011	1	6	electronics	electronic	NOUN
fuelectenerg-6011	1	7	and	and	CCONJ
fuelectenerg-6011	1	8	energetics	energetics	NOUN
fuelectenerg-6011	1	9	vol	vol	NOUN
fuelectenerg-6011	1	10	.	.	PUNCT
fuelectenerg-6011	2	1	33	33	NUM
fuelectenerg-6011	2	2	,	,	PUNCT
fuelectenerg-6011	2	3	no	no	DET
fuelectenerg-6011	2	4	2	2	NUM
fuelectenerg-6011	2	5	,	,	PUNCT
fuelectenerg-6011	2	6	june	june	PROPN
fuelectenerg-6011	2	7	2020	2020	NUM
fuelectenerg-6011	2	8	,	,	PUNCT
fuelectenerg-6011	2	9	pp	pp	ADP
fuelectenerg-6011	2	10	.	.	PUNCT
fuelectenerg-6011	3	1	155	155	NUM
fuelectenerg-6011	3	2	-	-	SYM
fuelectenerg-6011	3	3	167	167	NUM
fuelectenerg-6011	3	4	https://doi.org/10.2298/fuee2002155r	https://doi.org/10.2298/fuee2002155r	PROPN
fuelectenerg-6011	3	5	©	©	NOUN
fuelectenerg-6011	3	6	2020	2020	NUM
fuelectenerg-6011	3	7	by	by	ADP
fuelectenerg-6011	3	8	university	university	PROPN
fuelectenerg-6011	3	9	of	of	ADP
fuelectenerg-6011	3	10	niš	niš	PROPN
fuelectenerg-6011	3	11	,	,	PUNCT
fuelectenerg-6011	3	12	serbia	serbia	PROPN
fuelectenerg-6011	3	13	|	|	ADV
fuelectenerg-6011	3	14	creative	creative	ADJ
fuelectenerg-6011	3	15	commons	common	NOUN
fuelectenerg-6011	3	16	license	license	NOUN
fuelectenerg-6011	3	17	:	:	PUNCT
fuelectenerg-6011	3	18	cc	cc	VERB
fuelectenerg-6011	3	19	by	by	ADP
fuelectenerg-6011	3	20	-	-	PUNCT
fuelectenerg-6011	3	21	nc	nc	VERB
fuelectenerg-6011	3	22	-	-	PUNCT
fuelectenerg-6011	3	23	nd	nd	NOUN
fuelectenerg-6011	3	24	flash	flash	NOUN
fuelectenerg-6011	3	25	memory	memory	NOUN
fuelectenerg-6011	3	26	devices	device	NOUN
fuelectenerg-6011	3	27	with	with	ADP
fuelectenerg-6011	3	28	metal	metal	NOUN
fuelectenerg-6011	3	29	floating	float	VERB
fuelectenerg-6011	3	30	gate	gate	NOUN
fuelectenerg-6011	3	31	/	/	SYM
fuelectenerg-6011	3	32	metal	metal	NOUN
fuelectenerg-6011	3	33	nanocrystals	nanocrystal	NOUN
fuelectenerg-6011	3	34	as	as	ADP
fuelectenerg-6011	3	35	the	the	DET
fuelectenerg-6011	3	36	charge	charge	NOUN
fuelectenerg-6011	3	37	storage	storage	NOUN
fuelectenerg-6011	3	38	layer	layer	NOUN
fuelectenerg-6011	3	39	:	:	PUNCT
fuelectenerg-6011	3	40	a	a	DET
fuelectenerg-6011	3	41	status	status	NOUN
fuelectenerg-6011	3	42	review	review	VERB
fuelectenerg-6011	3	43	renu	renu	PROPN
fuelectenerg-6011	3	44	rajput	rajput	PROPN
fuelectenerg-6011	3	45	,	,	PUNCT
fuelectenerg-6011	3	46	rakesh	rakesh	PROPN
fuelectenerg-6011	3	47	vaid	vaid	PROPN
fuelectenerg-6011	3	48	department	department	PROPN
fuelectenerg-6011	3	49	of	of	ADP
fuelectenerg-6011	3	50	electronics	electronic	NOUN
fuelectenerg-6011	3	51	,	,	PUNCT
fuelectenerg-6011	3	52	university	university	NOUN
fuelectenerg-6011	3	53	of	of	ADP
fuelectenerg-6011	3	54	jammu	jammu	PROPN
fuelectenerg-6011	3	55	,	,	PUNCT
fuelectenerg-6011	3	56	jammu	jammu	PROPN
fuelectenerg-6011	3	57	,	,	PUNCT
fuelectenerg-6011	3	58	india	india	PROPN
fuelectenerg-6011	3	59	abstract	abstract	NOUN
fuelectenerg-6011	3	60	.	.	PUNCT
fuelectenerg-6011	4	1	traditional	traditional	ADJ
fuelectenerg-6011	4	2	flash	flash	NOUN
fuelectenerg-6011	4	3	memory	memory	NOUN
fuelectenerg-6011	4	4	devices	device	NOUN
fuelectenerg-6011	4	5	consist	consist	VERB
fuelectenerg-6011	4	6	of	of	ADP
fuelectenerg-6011	4	7	polysilicon	polysilicon	NOUN
fuelectenerg-6011	4	8	control	control	NOUN
fuelectenerg-6011	4	9	gate	gate	NOUN
fuelectenerg-6011	4	10	(	(	PUNCT
fuelectenerg-6011	4	11	cg	cg	NOUN
fuelectenerg-6011	4	12	)	)	PUNCT
fuelectenerg-6011	4	13	–	–	PUNCT
fuelectenerg-6011	4	14	oxide	oxide	NOUN
fuelectenerg-6011	4	15	-	-	PUNCT
fuelectenerg-6011	4	16	nitride	nitride	NOUN
fuelectenerg-6011	4	17	-	-	PUNCT
fuelectenerg-6011	4	18	oxide	oxide	NOUN
fuelectenerg-6011	4	19	(	(	PUNCT
fuelectenerg-6011	4	20	ono	ono	PROPN
fuelectenerg-6011	4	21	interpoly	interpoly	PROPN
fuelectenerg-6011	4	22	dielectric	dielectric	NOUN
fuelectenerg-6011	4	23	)	)	PUNCT
fuelectenerg-6011	4	24	–	–	PUNCT
fuelectenerg-6011	4	25	polysilicon	polysilicon	NOUN
fuelectenerg-6011	4	26	floating	float	VERB
fuelectenerg-6011	4	27	gate	gate	NOUN
fuelectenerg-6011	4	28	(	(	PUNCT
fuelectenerg-6011	4	29	fg	fg	PROPN
fuelectenerg-6011	4	30	)	)	PUNCT
fuelectenerg-6011	4	31	–	–	PUNCT
fuelectenerg-6011	4	32	silicon	silicon	NOUN
fuelectenerg-6011	4	33	oxide	oxide	NOUN
fuelectenerg-6011	4	34	(	(	PUNCT
fuelectenerg-6011	4	35	tunnel	tunnel	NOUN
fuelectenerg-6011	4	36	dielectric	dielectric	NOUN
fuelectenerg-6011	4	37	)	)	PUNCT
fuelectenerg-6011	4	38	–	–	PUNCT
fuelectenerg-6011	4	39	substrate	substrate	NOUN
fuelectenerg-6011	4	40	.	.	PUNCT
fuelectenerg-6011	5	1	the	the	DET
fuelectenerg-6011	5	2	dielectrics	dielectric	NOUN
fuelectenerg-6011	5	3	have	have	VERB
fuelectenerg-6011	5	4	to	to	PART
fuelectenerg-6011	5	5	be	be	AUX
fuelectenerg-6011	5	6	scaled	scale	VERB
fuelectenerg-6011	5	7	down	down	ADP
fuelectenerg-6011	5	8	considerably	considerably	ADV
fuelectenerg-6011	5	9	in	in	ADP
fuelectenerg-6011	5	10	order	order	NOUN
fuelectenerg-6011	5	11	to	to	PART
fuelectenerg-6011	5	12	meet	meet	VERB
fuelectenerg-6011	5	13	the	the	DET
fuelectenerg-6011	5	14	escalating	escalate	VERB
fuelectenerg-6011	5	15	demand	demand	NOUN
fuelectenerg-6011	5	16	for	for	ADP
fuelectenerg-6011	5	17	lower	low	ADJ
fuelectenerg-6011	5	18	write	write	NOUN
fuelectenerg-6011	5	19	/	/	SYM
fuelectenerg-6011	5	20	erase	erase	NOUN
fuelectenerg-6011	5	21	voltages	voltage	NOUN
fuelectenerg-6011	5	22	and	and	CCONJ
fuelectenerg-6011	5	23	higher	high	ADJ
fuelectenerg-6011	5	24	density	density	NOUN
fuelectenerg-6011	5	25	of	of	ADP
fuelectenerg-6011	5	26	cells	cell	NOUN
fuelectenerg-6011	5	27	.	.	PUNCT
fuelectenerg-6011	6	1	but	but	CCONJ
fuelectenerg-6011	6	2	as	as	SCONJ
fuelectenerg-6011	6	3	the	the	DET
fuelectenerg-6011	6	4	floating	float	VERB
fuelectenerg-6011	6	5	gate	gate	NOUN
fuelectenerg-6011	6	6	dimensions	dimension	NOUN
fuelectenerg-6011	6	7	are	be	AUX
fuelectenerg-6011	6	8	scaled	scale	VERB
fuelectenerg-6011	6	9	down	down	ADP
fuelectenerg-6011	6	10	the	the	DET
fuelectenerg-6011	6	11	charge	charge	NOUN
fuelectenerg-6011	6	12	stored	store	VERB
fuelectenerg-6011	6	13	in	in	ADP
fuelectenerg-6011	6	14	the	the	DET
fuelectenerg-6011	6	15	floating	float	VERB
fuelectenerg-6011	6	16	gate	gate	NOUN
fuelectenerg-6011	6	17	leak	leak	VERB
fuelectenerg-6011	6	18	out	out	ADP
fuelectenerg-6011	6	19	more	more	ADV
fuelectenerg-6011	6	20	easily	easily	ADV
fuelectenerg-6011	6	21	via	via	ADP
fuelectenerg-6011	6	22	thin	thin	ADJ
fuelectenerg-6011	6	23	tunneling	tunneling	NOUN
fuelectenerg-6011	6	24	oxide	oxide	NOUN
fuelectenerg-6011	6	25	below	below	ADP
fuelectenerg-6011	6	26	the	the	DET
fuelectenerg-6011	6	27	floating	float	VERB
fuelectenerg-6011	6	28	gate	gate	NOUN
fuelectenerg-6011	6	29	which	which	PRON
fuelectenerg-6011	6	30	causes	cause	VERB
fuelectenerg-6011	6	31	serious	serious	ADJ
fuelectenerg-6011	6	32	reliability	reliability	NOUN
fuelectenerg-6011	6	33	issues	issue	NOUN
fuelectenerg-6011	6	34	and	and	CCONJ
fuelectenerg-6011	6	35	the	the	DET
fuelectenerg-6011	6	36	whole	whole	ADJ
fuelectenerg-6011	6	37	amount	amount	NOUN
fuelectenerg-6011	6	38	of	of	ADP
fuelectenerg-6011	6	39	stored	store	VERB
fuelectenerg-6011	6	40	charge	charge	NOUN
fuelectenerg-6011	6	41	carrying	carry	VERB
fuelectenerg-6011	6	42	information	information	NOUN
fuelectenerg-6011	6	43	can	can	AUX
fuelectenerg-6011	6	44	be	be	AUX
fuelectenerg-6011	6	45	lost	lose	VERB
fuelectenerg-6011	6	46	.	.	PUNCT
fuelectenerg-6011	7	1	the	the	DET
fuelectenerg-6011	7	2	possible	possible	ADJ
fuelectenerg-6011	7	3	route	route	NOUN
fuelectenerg-6011	7	4	to	to	PART
fuelectenerg-6011	7	5	eliminate	eliminate	VERB
fuelectenerg-6011	7	6	this	this	DET
fuelectenerg-6011	7	7	problem	problem	NOUN
fuelectenerg-6011	7	8	is	be	AUX
fuelectenerg-6011	7	9	to	to	PART
fuelectenerg-6011	7	10	use	use	VERB
fuelectenerg-6011	7	11	high	high	ADJ
fuelectenerg-6011	7	12	-	-	PUNCT
fuelectenerg-6011	7	13	k	k	NOUN
fuelectenerg-6011	7	14	based	base	VERB
fuelectenerg-6011	7	15	interpoly	interpoly	NOUN
fuelectenerg-6011	7	16	dielectric	dielectric	NOUN
fuelectenerg-6011	7	17	and	and	CCONJ
fuelectenerg-6011	7	18	to	to	PART
fuelectenerg-6011	7	19	replace	replace	VERB
fuelectenerg-6011	7	20	the	the	DET
fuelectenerg-6011	7	21	polysilicon	polysilicon	NOUN
fuelectenerg-6011	7	22	floating	float	VERB
fuelectenerg-6011	7	23	gate	gate	NOUN
fuelectenerg-6011	7	24	with	with	ADP
fuelectenerg-6011	7	25	a	a	DET
fuelectenerg-6011	7	26	metal	metal	NOUN
fuelectenerg-6011	7	27	floating	float	VERB
fuelectenerg-6011	7	28	gate	gate	NOUN
fuelectenerg-6011	7	29	.	.	PUNCT
fuelectenerg-6011	8	1	at	at	ADP
fuelectenerg-6011	8	2	larger	large	ADJ
fuelectenerg-6011	8	3	physical	physical	ADJ
fuelectenerg-6011	8	4	thickness	thickness	NOUN
fuelectenerg-6011	8	5	,	,	PUNCT
fuelectenerg-6011	8	6	these	these	DET
fuelectenerg-6011	8	7	materials	material	NOUN
fuelectenerg-6011	8	8	have	have	VERB
fuelectenerg-6011	8	9	similar	similar	ADJ
fuelectenerg-6011	8	10	capacitance	capacitance	NOUN
fuelectenerg-6011	8	11	value	value	NOUN
fuelectenerg-6011	8	12	hence	hence	ADV
fuelectenerg-6011	8	13	avoiding	avoid	VERB
fuelectenerg-6011	8	14	tunneling	tunneling	NOUN
fuelectenerg-6011	8	15	effect	effect	NOUN
fuelectenerg-6011	8	16	.	.	PUNCT
fuelectenerg-6011	9	1	discrete	discrete	ADJ
fuelectenerg-6011	9	2	nanocrystal	nanocrystal	ADJ
fuelectenerg-6011	9	3	memory	memory	NOUN
fuelectenerg-6011	9	4	has	have	AUX
fuelectenerg-6011	9	5	also	also	ADV
fuelectenerg-6011	9	6	been	be	AUX
fuelectenerg-6011	9	7	proposed	propose	VERB
fuelectenerg-6011	9	8	to	to	PART
fuelectenerg-6011	9	9	solve	solve	VERB
fuelectenerg-6011	9	10	this	this	DET
fuelectenerg-6011	9	11	problem	problem	NOUN
fuelectenerg-6011	9	12	.	.	PUNCT
fuelectenerg-6011	10	1	due	due	ADP
fuelectenerg-6011	10	2	to	to	ADP
fuelectenerg-6011	10	3	its	its	PRON
fuelectenerg-6011	10	4	high	high	ADJ
fuelectenerg-6011	10	5	operation	operation	NOUN
fuelectenerg-6011	10	6	speed	speed	NOUN
fuelectenerg-6011	10	7	,	,	PUNCT
fuelectenerg-6011	10	8	excellent	excellent	ADJ
fuelectenerg-6011	10	9	scalability	scalability	NOUN
fuelectenerg-6011	10	10	and	and	CCONJ
fuelectenerg-6011	10	11	higher	high	ADJ
fuelectenerg-6011	10	12	reliability	reliability	NOUN
fuelectenerg-6011	10	13	it	it	PRON
fuelectenerg-6011	10	14	has	have	AUX
fuelectenerg-6011	10	15	been	be	AUX
fuelectenerg-6011	10	16	shown	show	VERB
fuelectenerg-6011	10	17	as	as	ADP
fuelectenerg-6011	10	18	a	a	DET
fuelectenerg-6011	10	19	promising	promising	ADJ
fuelectenerg-6011	10	20	candidate	candidate	NOUN
fuelectenerg-6011	10	21	for	for	ADP
fuelectenerg-6011	10	22	future	future	ADJ
fuelectenerg-6011	10	23	non	non	ADJ
fuelectenerg-6011	10	24	-	-	ADJ
fuelectenerg-6011	10	25	volatile	volatile	ADJ
fuelectenerg-6011	10	26	memory	memory	NOUN
fuelectenerg-6011	10	27	applications	application	NOUN
fuelectenerg-6011	10	28	.	.	PUNCT
fuelectenerg-6011	11	1	this	this	DET
fuelectenerg-6011	11	2	review	review	NOUN
fuelectenerg-6011	11	3	paper	paper	NOUN
fuelectenerg-6011	11	4	focuses	focus	VERB
fuelectenerg-6011	11	5	on	on	ADP
fuelectenerg-6011	11	6	the	the	DET
fuelectenerg-6011	11	7	recent	recent	ADJ
fuelectenerg-6011	11	8	efforts	effort	NOUN
fuelectenerg-6011	11	9	and	and	CCONJ
fuelectenerg-6011	11	10	research	research	NOUN
fuelectenerg-6011	11	11	activities	activity	NOUN
fuelectenerg-6011	11	12	related	relate	VERB
fuelectenerg-6011	11	13	to	to	ADP
fuelectenerg-6011	11	14	the	the	DET
fuelectenerg-6011	11	15	fabrication	fabrication	NOUN
fuelectenerg-6011	11	16	and	and	CCONJ
fuelectenerg-6011	11	17	characterization	characterization	NOUN
fuelectenerg-6011	11	18	of	of	ADP
fuelectenerg-6011	11	19	non	non	ADJ
fuelectenerg-6011	11	20	-	-	ADJ
fuelectenerg-6011	11	21	volatile	volatile	ADJ
fuelectenerg-6011	11	22	memory	memory	NOUN
fuelectenerg-6011	11	23	device	device	NOUN
fuelectenerg-6011	11	24	with	with	ADP
fuelectenerg-6011	11	25	metal	metal	NOUN
fuelectenerg-6011	11	26	floating	float	VERB
fuelectenerg-6011	11	27	gate	gate	NOUN
fuelectenerg-6011	11	28	/	/	SYM
fuelectenerg-6011	11	29	metal	metal	NOUN
fuelectenerg-6011	11	30	nanocrystals	nanocrystal	NOUN
fuelectenerg-6011	11	31	as	as	ADP
fuelectenerg-6011	11	32	the	the	DET
fuelectenerg-6011	11	33	charge	charge	NOUN
fuelectenerg-6011	11	34	storage	storage	NOUN
fuelectenerg-6011	11	35	layer	layer	NOUN
fuelectenerg-6011	11	36	.	.	PUNCT
fuelectenerg-6011	12	1	key	key	ADJ
fuelectenerg-6011	12	2	words	word	NOUN
fuelectenerg-6011	12	3	:	:	PUNCT
fuelectenerg-6011	12	4	metal	metal	NOUN
fuelectenerg-6011	12	5	oxide	oxide	NOUN
fuelectenerg-6011	12	6	semiconductor	semiconductor	NOUN
fuelectenerg-6011	12	7	(	(	PUNCT
fuelectenerg-6011	12	8	mos	mos	NOUN
fuelectenerg-6011	12	9	)	)	PUNCT
fuelectenerg-6011	12	10	,	,	PUNCT
fuelectenerg-6011	12	11	non	non	ADJ
fuelectenerg-6011	12	12	-	-	ADJ
fuelectenerg-6011	12	13	volatile	volatile	ADJ
fuelectenerg-6011	12	14	memory	memory	NOUN
fuelectenerg-6011	12	15	(	(	PUNCT
fuelectenerg-6011	12	16	nvm	nvm	NOUN
fuelectenerg-6011	12	17	)	)	PUNCT
fuelectenerg-6011	12	18	,	,	PUNCT
fuelectenerg-6011	12	19	nanocrystal	nanocrystal	PROPN
fuelectenerg-6011	12	20	(	(	PUNCT
fuelectenerg-6011	12	21	nc	nc	PROPN
fuelectenerg-6011	12	22	)	)	PUNCT
fuelectenerg-6011	12	23	,	,	PUNCT
fuelectenerg-6011	12	24	dielectrics	dielectric	NOUN
fuelectenerg-6011	12	25	,	,	PUNCT
fuelectenerg-6011	12	26	interpoly	interpoly	ADJ
fuelectenerg-6011	12	27	dielectric	dielectric	NOUN
fuelectenerg-6011	12	28	(	(	PUNCT
fuelectenerg-6011	12	29	ipd	ipd	PROPN
fuelectenerg-6011	12	30	)	)	PUNCT
fuelectenerg-6011	12	31	,	,	PUNCT
fuelectenerg-6011	12	32	floating	float	VERB
fuelectenerg-6011	12	33	gate	gate	NOUN
fuelectenerg-6011	12	34	(	(	PUNCT
fuelectenerg-6011	12	35	fg	fg	NOUN
fuelectenerg-6011	12	36	)	)	PUNCT
fuelectenerg-6011	12	37	1	1	NUM
fuelectenerg-6011	12	38	.	.	PUNCT
fuelectenerg-6011	13	1	introduction	introduction	NOUN
fuelectenerg-6011	13	2	flash	flash	NOUN
fuelectenerg-6011	13	3	memory	memory	NOUN
fuelectenerg-6011	13	4	is	be	AUX
fuelectenerg-6011	13	5	the	the	DET
fuelectenerg-6011	13	6	extensively	extensively	ADV
fuelectenerg-6011	13	7	used	use	VERB
fuelectenerg-6011	13	8	non	non	ADJ
fuelectenerg-6011	13	9	-	-	ADJ
fuelectenerg-6011	13	10	volatile	volatile	ADJ
fuelectenerg-6011	13	11	information	information	NOUN
fuelectenerg-6011	13	12	-	-	PUNCT
fuelectenerg-6011	13	13	storage	storage	NOUN
fuelectenerg-6011	13	14	device	device	NOUN
fuelectenerg-6011	13	15	today	today	NOUN
fuelectenerg-6011	13	16	because	because	SCONJ
fuelectenerg-6011	13	17	of	of	ADP
fuelectenerg-6011	13	18	its	its	PRON
fuelectenerg-6011	13	19	multi	multi	ADJ
fuelectenerg-6011	13	20	-	-	NOUN
fuelectenerg-6011	13	21	bit	bit	NOUN
fuelectenerg-6011	13	22	per	per	ADP
fuelectenerg-6011	13	23	cell	cell	NOUN
fuelectenerg-6011	13	24	storage	storage	NOUN
fuelectenerg-6011	13	25	property	property	NOUN
fuelectenerg-6011	13	26	and	and	CCONJ
fuelectenerg-6011	13	27	lesser	less	ADJ
fuelectenerg-6011	13	28	cost	cost	NOUN
fuelectenerg-6011	13	29	per	per	ADP
fuelectenerg-6011	13	30	bit	bit	NOUN
fuelectenerg-6011	13	31	.	.	PUNCT
fuelectenerg-6011	14	1	moreover	moreover	ADV
fuelectenerg-6011	14	2	its	its	PRON
fuelectenerg-6011	14	3	fabrication	fabrication	NOUN
fuelectenerg-6011	14	4	process	process	NOUN
fuelectenerg-6011	14	5	is	be	AUX
fuelectenerg-6011	14	6	consistent	consistent	ADJ
fuelectenerg-6011	14	7	with	with	ADP
fuelectenerg-6011	14	8	the	the	DET
fuelectenerg-6011	14	9	present	present	ADJ
fuelectenerg-6011	14	10	cmos	cmos	NOUN
fuelectenerg-6011	14	11	process	process	NOUN
fuelectenerg-6011	14	12	and	and	CCONJ
fuelectenerg-6011	14	13	is	be	AUX
fuelectenerg-6011	14	14	a	a	DET
fuelectenerg-6011	14	15	relevant	relevant	ADJ
fuelectenerg-6011	14	16	solution	solution	NOUN
fuelectenerg-6011	14	17	for	for	ADP
fuelectenerg-6011	14	18	embedded	embed	VERB
fuelectenerg-6011	14	19	memory	memory	NOUN
fuelectenerg-6011	14	20	applications	application	NOUN
fuelectenerg-6011	14	21	.	.	PUNCT
fuelectenerg-6011	15	1	the	the	DET
fuelectenerg-6011	15	2	qualitative	qualitative	ADJ
fuelectenerg-6011	15	3	comparison	comparison	NOUN
fuelectenerg-6011	15	4	of	of	ADP
fuelectenerg-6011	15	5	various	various	ADJ
fuelectenerg-6011	15	6	nonvolatile	nonvolatile	NOUN
fuelectenerg-6011	15	7	mos	mos	NOUN
fuelectenerg-6011	15	8	memory	memory	NOUN
fuelectenerg-6011	15	9	devices	device	NOUN
fuelectenerg-6011	15	10	in	in	ADP
fuelectenerg-6011	15	11	the	the	DET
fuelectenerg-6011	15	12	flexibility	flexibility	NOUN
fuelectenerg-6011	15	13	-	-	PUNCT
fuelectenerg-6011	15	14	cost	cost	NOUN
fuelectenerg-6011	15	15	plane	plane	NOUN
fuelectenerg-6011	15	16	[	[	X
fuelectenerg-6011	15	17	1	1	NUM
fuelectenerg-6011	15	18	]	]	PUNCT
fuelectenerg-6011	15	19	is	be	AUX
fuelectenerg-6011	15	20	shown	show	VERB
fuelectenerg-6011	15	21	in	in	ADP
fuelectenerg-6011	15	22	fig.1	fig.1	PROPN
fuelectenerg-6011	15	23	.	.	PUNCT
fuelectenerg-6011	15	24	nor	nor	CCONJ
fuelectenerg-6011	15	25	flash	flash	VERB
fuelectenerg-6011	15	26	memory	memory	NOUN
fuelectenerg-6011	15	27	and	and	CCONJ
fuelectenerg-6011	15	28	nand	nand	NOUN
fuelectenerg-6011	15	29	flash	flash	NOUN
fuelectenerg-6011	15	30	memory	memory	NOUN
fuelectenerg-6011	15	31	are	be	AUX
fuelectenerg-6011	15	32	the	the	DET
fuelectenerg-6011	15	33	two	two	NUM
fuelectenerg-6011	15	34	main	main	ADJ
fuelectenerg-6011	15	35	types	type	NOUN
fuelectenerg-6011	15	36	of	of	ADP
fuelectenerg-6011	15	37	flash	flash	NOUN
fuelectenerg-6011	15	38	memory	memory	NOUN
fuelectenerg-6011	15	39	used	use	VERB
fuelectenerg-6011	15	40	today	today	NOUN
fuelectenerg-6011	15	41	.	.	PUNCT
fuelectenerg-6011	16	1	the	the	DET
fuelectenerg-6011	16	2	key	key	ADJ
fuelectenerg-6011	16	3	difference	difference	NOUN
fuelectenerg-6011	16	4	between	between	ADP
fuelectenerg-6011	16	5	the	the	DET
fuelectenerg-6011	16	6	two	two	NUM
fuelectenerg-6011	16	7	is	be	AUX
fuelectenerg-6011	16	8	that	that	PRON
fuelectenerg-6011	16	9	nor	nor	CCONJ
fuelectenerg-6011	16	10	flash	flash	VERB
fuelectenerg-6011	16	11	memory	memory	NOUN
fuelectenerg-6011	16	12	allow	allow	VERB
fuelectenerg-6011	16	13	a	a	DET
fuelectenerg-6011	16	14	single	single	ADJ
fuelectenerg-6011	16	15	byte	byte	NOUN
fuelectenerg-6011	16	16	received	receive	VERB
fuelectenerg-6011	16	17	december	december	PROPN
fuelectenerg-6011	16	18	26	26	NUM
fuelectenerg-6011	16	19	,	,	PUNCT
fuelectenerg-6011	16	20	2019	2019	NUM
fuelectenerg-6011	16	21	corresponding	correspond	VERB
fuelectenerg-6011	16	22	author	author	NOUN
fuelectenerg-6011	16	23	:	:	PUNCT
fuelectenerg-6011	16	24	rakesh	rakesh	PROPN
fuelectenerg-6011	16	25	k.	k.	PROPN
fuelectenerg-6011	16	26	vaid	vaid	PROPN
fuelectenerg-6011	16	27	department	department	PROPN
fuelectenerg-6011	16	28	of	of	ADP
fuelectenerg-6011	16	29	electronics	electronic	NOUN
fuelectenerg-6011	16	30	,	,	PUNCT
fuelectenerg-6011	16	31	university	university	NOUN
fuelectenerg-6011	16	32	of	of	ADP
fuelectenerg-6011	16	33	jammu	jammu	PROPN
fuelectenerg-6011	16	34	,	,	PUNCT
fuelectenerg-6011	16	35	jammu-180006	jammu-180006	NOUN
fuelectenerg-6011	16	36	,	,	PUNCT
fuelectenerg-6011	16	37	india	india	PROPN
fuelectenerg-6011	16	38	(	(	PUNCT
fuelectenerg-6011	16	39	e	e	NOUN
fuelectenerg-6011	16	40	-	-	NOUN
fuelectenerg-6011	16	41	mail	mail	NOUN
fuelectenerg-6011	16	42	:	:	PUNCT
fuelectenerg-6011	16	43	rakeshvaid@ieee.org	rakeshvaid@ieee.org	X
fuelectenerg-6011	16	44	)	)	PUNCT
fuelectenerg-6011	16	45	156	156	NUM
fuelectenerg-6011	16	46	r.	r.	PROPN
fuelectenerg-6011	16	47	rajput	rajput	PROPN
fuelectenerg-6011	16	48	,	,	PUNCT
fuelectenerg-6011	16	49	r.	r.	PROPN
fuelectenerg-6011	16	50	vaid	vaid	PROPN
fuelectenerg-6011	16	51	to	to	PART
fuelectenerg-6011	16	52	be	be	AUX
fuelectenerg-6011	16	53	written	write	VERB
fuelectenerg-6011	16	54	to	to	ADP
fuelectenerg-6011	16	55	an	an	DET
fuelectenerg-6011	16	56	erased	erase	VERB
fuelectenerg-6011	16	57	location	location	NOUN
fuelectenerg-6011	16	58	or	or	CCONJ
fuelectenerg-6011	16	59	read	read	VERB
fuelectenerg-6011	16	60	independently	independently	ADV
fuelectenerg-6011	16	61	where	where	SCONJ
fuelectenerg-6011	16	62	as	as	SCONJ
fuelectenerg-6011	16	63	nand	nand	NOUN
fuelectenerg-6011	16	64	flash	flash	NOUN
fuelectenerg-6011	16	65	memory	memory	NOUN
fuelectenerg-6011	16	66	is	be	AUX
fuelectenerg-6011	16	67	written	write	VERB
fuelectenerg-6011	16	68	in	in	ADP
fuelectenerg-6011	16	69	blocks	block	NOUN
fuelectenerg-6011	16	70	or	or	CCONJ
fuelectenerg-6011	16	71	pages	page	NOUN
fuelectenerg-6011	16	72	.	.	PUNCT
fuelectenerg-6011	17	1	the	the	DET
fuelectenerg-6011	17	2	other	other	ADJ
fuelectenerg-6011	17	3	contrast	contrast	NOUN
fuelectenerg-6011	17	4	is	be	AUX
fuelectenerg-6011	17	5	that	that	SCONJ
fuelectenerg-6011	17	6	the	the	DET
fuelectenerg-6011	17	7	former	former	ADJ
fuelectenerg-6011	17	8	uses	use	VERB
fuelectenerg-6011	17	9	channel	channel	NOUN
fuelectenerg-6011	17	10	hot	hot	ADJ
fuelectenerg-6011	17	11	electron	electron	NOUN
fuelectenerg-6011	17	12	(	(	PUNCT
fuelectenerg-6011	17	13	che	che	NOUN
fuelectenerg-6011	17	14	)	)	PUNCT
fuelectenerg-6011	17	15	for	for	ADP
fuelectenerg-6011	17	16	programming	programming	NOUN
fuelectenerg-6011	17	17	and	and	CCONJ
fuelectenerg-6011	17	18	has	have	VERB
fuelectenerg-6011	17	19	slower	slow	ADJ
fuelectenerg-6011	17	20	program	program	NOUN
fuelectenerg-6011	17	21	-	-	PUNCT
fuelectenerg-6011	17	22	erase	erase	NOUN
fuelectenerg-6011	17	23	speed	speed	NOUN
fuelectenerg-6011	17	24	while	while	SCONJ
fuelectenerg-6011	17	25	the	the	DET
fuelectenerg-6011	17	26	later	later	ADV
fuelectenerg-6011	17	27	uses	use	VERB
fuelectenerg-6011	17	28	fowler	fowler	PROPN
fuelectenerg-6011	17	29	-	-	PUNCT
fuelectenerg-6011	17	30	nordheim	nordheim	PROPN
fuelectenerg-6011	17	31	tunneling	tunnel	VERB
fuelectenerg-6011	17	32	for	for	ADP
fuelectenerg-6011	17	33	programming	programming	NOUN
fuelectenerg-6011	17	34	and	and	CCONJ
fuelectenerg-6011	17	35	has	have	VERB
fuelectenerg-6011	17	36	fast	fast	ADJ
fuelectenerg-6011	17	37	program	program	NOUN
fuelectenerg-6011	17	38	-	-	PUNCT
fuelectenerg-6011	17	39	erase	erase	NOUN
fuelectenerg-6011	17	40	speed	speed	NOUN
fuelectenerg-6011	17	41	.	.	PUNCT
fuelectenerg-6011	18	1	rom	rom	NOUN
fuelectenerg-6011	18	2	not	not	PART
fuelectenerg-6011	18	3	electrically	electrically	ADV
fuelectenerg-6011	18	4	programmable	programmable	ADJ
fuelectenerg-6011	18	5	eprom	eprom	NOUN
fuelectenerg-6011	18	6	programmable	programmable	ADJ
fuelectenerg-6011	18	7	and	and	CCONJ
fuelectenerg-6011	18	8	electrically	electrically	ADV
fuelectenerg-6011	18	9	erasable	erasable	ADJ
fuelectenerg-6011	18	10	flash	flash	VERB
fuelectenerg-6011	18	11	programmable	programmable	ADJ
fuelectenerg-6011	18	12	and	and	CCONJ
fuelectenerg-6011	18	13	erasable	erasable	ADJ
fuelectenerg-6011	18	14	in	in	ADP
fuelectenerg-6011	18	15	system	system	NOUN
fuelectenerg-6011	18	16	eeprom	eeprom	NOUN
fuelectenerg-6011	18	17	byte	byte	VERB
fuelectenerg-6011	18	18	rewrite	rewrite	NOUN
fuelectenerg-6011	18	19	capability	capability	NOUN
fuelectenerg-6011	18	20	cost	cost	NOUN
fuelectenerg-6011	18	21	flexibility	flexibility	NOUN
fuelectenerg-6011	18	22	fig	fig	NOUN
fuelectenerg-6011	18	23	.	.	PUNCT
fuelectenerg-6011	19	1	1	1	NUM
fuelectenerg-6011	19	2	non	non	ADJ
fuelectenerg-6011	19	3	-	-	ADJ
fuelectenerg-6011	19	4	volatile	volatile	ADJ
fuelectenerg-6011	19	5	mos	mos	NOUN
fuelectenerg-6011	19	6	memory	memory	NOUN
fuelectenerg-6011	19	7	qualitative	qualitative	ADJ
fuelectenerg-6011	19	8	comparison	comparison	NOUN
fuelectenerg-6011	19	9	in	in	ADP
fuelectenerg-6011	19	10	the	the	DET
fuelectenerg-6011	19	11	flexibility	flexibility	NOUN
fuelectenerg-6011	19	12	-	-	PUNCT
fuelectenerg-6011	19	13	cost	cost	NOUN
fuelectenerg-6011	19	14	plane	plane	NOUN
fuelectenerg-6011	19	15	[	[	X
fuelectenerg-6011	19	16	1	1	NUM
fuelectenerg-6011	19	17	]	]	X
fuelectenerg-6011	19	18	nand	nand	NOUN
fuelectenerg-6011	19	19	flash	flash	NOUN
fuelectenerg-6011	19	20	memory	memory	NOUN
fuelectenerg-6011	19	21	finds	find	VERB
fuelectenerg-6011	19	22	use	use	NOUN
fuelectenerg-6011	19	23	in	in	ADP
fuelectenerg-6011	19	24	data	datum	NOUN
fuelectenerg-6011	19	25	storage	storage	NOUN
fuelectenerg-6011	19	26	devices	device	NOUN
fuelectenerg-6011	19	27	like	like	ADP
fuelectenerg-6011	19	28	mobile	mobile	ADJ
fuelectenerg-6011	19	29	phones	phone	NOUN
fuelectenerg-6011	19	30	,	,	PUNCT
fuelectenerg-6011	19	31	pen	pen	NOUN
fuelectenerg-6011	19	32	drives	drive	NOUN
fuelectenerg-6011	19	33	,	,	PUNCT
fuelectenerg-6011	19	34	digital	digital	ADJ
fuelectenerg-6011	19	35	cameras	camera	NOUN
fuelectenerg-6011	19	36	etc	etc	X
fuelectenerg-6011	19	37	.	.	X
fuelectenerg-6011	19	38	and	and	CCONJ
fuelectenerg-6011	19	39	the	the	DET
fuelectenerg-6011	19	40	nand	nand	NOUN
fuelectenerg-6011	19	41	flash	flash	NOUN
fuelectenerg-6011	19	42	based	base	VERB
fuelectenerg-6011	19	43	solid	solid	ADJ
fuelectenerg-6011	19	44	state	state	NOUN
fuelectenerg-6011	19	45	drive	drive	NOUN
fuelectenerg-6011	19	46	(	(	PUNCT
fuelectenerg-6011	19	47	ssd	ssd	NOUN
fuelectenerg-6011	19	48	)	)	PUNCT
fuelectenerg-6011	19	49	is	be	AUX
fuelectenerg-6011	19	50	used	use	VERB
fuelectenerg-6011	19	51	as	as	ADP
fuelectenerg-6011	19	52	a	a	DET
fuelectenerg-6011	19	53	replacement	replacement	NOUN
fuelectenerg-6011	19	54	for	for	ADP
fuelectenerg-6011	19	55	hard	hard	ADJ
fuelectenerg-6011	19	56	disk	disk	NOUN
fuelectenerg-6011	19	57	drive	drive	NOUN
fuelectenerg-6011	19	58	(	(	PUNCT
fuelectenerg-6011	19	59	hdd	hdd	NOUN
fuelectenerg-6011	19	60	)	)	PUNCT
fuelectenerg-6011	19	61	in	in	ADP
fuelectenerg-6011	19	62	modern	modern	ADJ
fuelectenerg-6011	19	63	computers	computer	NOUN
fuelectenerg-6011	19	64	and	and	CCONJ
fuelectenerg-6011	19	65	laptops	laptop	NOUN
fuelectenerg-6011	19	66	.	.	PUNCT
fuelectenerg-6011	20	1	the	the	DET
fuelectenerg-6011	20	2	growing	grow	VERB
fuelectenerg-6011	20	3	demand	demand	NOUN
fuelectenerg-6011	20	4	for	for	ADP
fuelectenerg-6011	20	5	this	this	DET
fuelectenerg-6011	20	6	technology	technology	NOUN
fuelectenerg-6011	20	7	is	be	AUX
fuelectenerg-6011	20	8	the	the	DET
fuelectenerg-6011	20	9	key	key	ADJ
fuelectenerg-6011	20	10	driving	driving	NOUN
fuelectenerg-6011	20	11	force	force	NOUN
fuelectenerg-6011	20	12	to	to	PART
fuelectenerg-6011	20	13	increase	increase	VERB
fuelectenerg-6011	20	14	the	the	DET
fuelectenerg-6011	20	15	data	data	NOUN
fuelectenerg-6011	20	16	storage	storage	NOUN
fuelectenerg-6011	20	17	capacity	capacity	NOUN
fuelectenerg-6011	20	18	and	and	CCONJ
fuelectenerg-6011	20	19	decrease	decrease	VERB
fuelectenerg-6011	20	20	the	the	DET
fuelectenerg-6011	20	21	cost	cost	NOUN
fuelectenerg-6011	20	22	per	per	ADP
fuelectenerg-6011	20	23	bit	bit	NOUN
fuelectenerg-6011	20	24	in	in	ADP
fuelectenerg-6011	20	25	flash	flash	NOUN
fuelectenerg-6011	20	26	memories	memory	NOUN
fuelectenerg-6011	20	27	by	by	ADP
fuelectenerg-6011	20	28	scaling	scale	VERB
fuelectenerg-6011	20	29	down	down	ADP
fuelectenerg-6011	20	30	the	the	DET
fuelectenerg-6011	20	31	flash	flash	NOUN
fuelectenerg-6011	20	32	cell	cell	NOUN
fuelectenerg-6011	20	33	to	to	ADP
fuelectenerg-6011	20	34	smaller	small	ADJ
fuelectenerg-6011	20	35	and	and	CCONJ
fuelectenerg-6011	20	36	smaller	small	ADJ
fuelectenerg-6011	20	37	dimensions	dimension	NOUN
fuelectenerg-6011	20	38	.	.	PUNCT
fuelectenerg-6011	21	1	in	in	ADP
fuelectenerg-6011	21	2	continual	continual	ADJ
fuelectenerg-6011	21	3	scaling	scale	VERB
fuelectenerg-6011	21	4	the	the	DET
fuelectenerg-6011	21	5	major	major	ADJ
fuelectenerg-6011	21	6	roadblocks	roadblock	NOUN
fuelectenerg-6011	21	7	are	be	AUX
fuelectenerg-6011	21	8	being	be	AUX
fuelectenerg-6011	21	9	faced	face	VERB
fuelectenerg-6011	21	10	by	by	ADP
fuelectenerg-6011	21	11	both	both	PRON
fuelectenerg-6011	21	12	nor	nor	CCONJ
fuelectenerg-6011	21	13	and	and	CCONJ
fuelectenerg-6011	21	14	nand	nand	VERB
fuelectenerg-6011	21	15	flash	flash	NOUN
fuelectenerg-6011	21	16	memories	memory	NOUN
fuelectenerg-6011	21	17	.	.	PUNCT
fuelectenerg-6011	22	1	the	the	DET
fuelectenerg-6011	22	2	scaling	scale	VERB
fuelectenerg-6011	22	3	projection	projection	NOUN
fuelectenerg-6011	22	4	for	for	ADP
fuelectenerg-6011	22	5	floating	float	VERB
fuelectenerg-6011	22	6	-	-	PUNCT
fuelectenerg-6011	22	7	gate	gate	NOUN
fuelectenerg-6011	22	8	nor	nor	CCONJ
fuelectenerg-6011	22	9	and	and	CCONJ
fuelectenerg-6011	22	10	nand	nand	VERB
fuelectenerg-6011	22	11	flash	flash	NOUN
fuelectenerg-6011	22	12	memory	memory	NOUN
fuelectenerg-6011	22	13	by	by	ADP
fuelectenerg-6011	22	14	international	international	ADJ
fuelectenerg-6011	22	15	technology	technology	NOUN
fuelectenerg-6011	22	16	roadmap	roadmap	NOUN
fuelectenerg-6011	22	17	for	for	ADP
fuelectenerg-6011	22	18	semiconductors	semiconductor	NOUN
fuelectenerg-6011	22	19	(	(	PUNCT
fuelectenerg-6011	22	20	itrs	itrs	ADJ
fuelectenerg-6011	22	21	)	)	PUNCT
fuelectenerg-6011	23	1	[	[	X
fuelectenerg-6011	23	2	2	2	X
fuelectenerg-6011	23	3	]	]	PUNCT
fuelectenerg-6011	23	4	is	be	AUX
fuelectenerg-6011	23	5	shown	show	VERB
fuelectenerg-6011	23	6	widely	widely	ADV
fuelectenerg-6011	23	7	in	in	ADP
fuelectenerg-6011	23	8	table	table	NOUN
fuelectenerg-6011	23	9	1	1	NUM
fuelectenerg-6011	23	10	and	and	CCONJ
fuelectenerg-6011	23	11	2	2	NUM
fuelectenerg-6011	23	12	.	.	NOUN
fuelectenerg-6011	23	13	mos	mos	PROPN
fuelectenerg-6011	23	14	memory	memory	NOUN
fuelectenerg-6011	23	15	devices	device	NOUN
fuelectenerg-6011	23	16	rely	rely	VERB
fuelectenerg-6011	23	17	on	on	ADP
fuelectenerg-6011	23	18	the	the	DET
fuelectenerg-6011	23	19	charge	charge	NOUN
fuelectenerg-6011	23	20	stored	store	VERB
fuelectenerg-6011	23	21	in	in	ADP
fuelectenerg-6011	23	22	the	the	DET
fuelectenerg-6011	23	23	floating	float	VERB
fuelectenerg-6011	23	24	gate	gate	NOUN
fuelectenerg-6011	23	25	to	to	PART
fuelectenerg-6011	23	26	cause	cause	VERB
fuelectenerg-6011	23	27	a	a	DET
fuelectenerg-6011	23	28	shift	shift	NOUN
fuelectenerg-6011	23	29	in	in	ADP
fuelectenerg-6011	23	30	the	the	DET
fuelectenerg-6011	23	31	threshold	threshold	NOUN
fuelectenerg-6011	23	32	/	/	SYM
fuelectenerg-6011	23	33	flatband	flatband	NOUN
fuelectenerg-6011	23	34	voltage	voltage	NOUN
fuelectenerg-6011	23	35	.	.	PUNCT
fuelectenerg-6011	24	1	the	the	DET
fuelectenerg-6011	24	2	schematic	schematic	PROPN
fuelectenerg-6011	24	3	cross	cross	NOUN
fuelectenerg-6011	24	4	section	section	NOUN
fuelectenerg-6011	24	5	of	of	ADP
fuelectenerg-6011	24	6	a	a	DET
fuelectenerg-6011	24	7	floating	float	VERB
fuelectenerg-6011	24	8	-	-	PUNCT
fuelectenerg-6011	24	9	gate	gate	NOUN
fuelectenerg-6011	24	10	mos	mos	PROPN
fuelectenerg-6011	24	11	memory	memory	NOUN
fuelectenerg-6011	24	12	cell	cell	NOUN
fuelectenerg-6011	24	13	is	be	AUX
fuelectenerg-6011	24	14	shown	show	VERB
fuelectenerg-6011	24	15	in	in	ADP
fuelectenerg-6011	24	16	fig.2	fig.2	PROPN
fuelectenerg-6011	24	17	.	.	PUNCT
fuelectenerg-6011	24	18	fig	fig	NOUN
fuelectenerg-6011	24	19	.	.	PUNCT
fuelectenerg-6011	25	1	2	2	NUM
fuelectenerg-6011	25	2	schematic	schematic	ADJ
fuelectenerg-6011	25	3	cross	cross	NOUN
fuelectenerg-6011	25	4	section	section	NOUN
fuelectenerg-6011	25	5	of	of	ADP
fuelectenerg-6011	25	6	mos	mos	PROPN
fuelectenerg-6011	25	7	memory	memory	NOUN
fuelectenerg-6011	25	8	cell	cell	NOUN
fuelectenerg-6011	25	9	flash	flash	NOUN
fuelectenerg-6011	25	10	memory	memory	NOUN
fuelectenerg-6011	25	11	devices	device	NOUN
fuelectenerg-6011	25	12	with	with	ADP
fuelectenerg-6011	25	13	metal	metal	NOUN
fuelectenerg-6011	25	14	floating	float	VERB
fuelectenerg-6011	25	15	gate	gate	NOUN
fuelectenerg-6011	25	16	/	/	SYM
fuelectenerg-6011	25	17	metal	metal	NOUN
fuelectenerg-6011	25	18	nanocrystals	nanocrystal	NOUN
fuelectenerg-6011	25	19	as	as	ADP
fuelectenerg-6011	25	20	the	the	DET
fuelectenerg-6011	25	21	charge	charge	NOUN
fuelectenerg-6011	25	22	storage	storage	NOUN
fuelectenerg-6011	25	23	layer	layer	NOUN
fuelectenerg-6011	25	24	157	157	NUM
fuelectenerg-6011	25	25	conventionally	conventionally	ADV
fuelectenerg-6011	25	26	,	,	PUNCT
fuelectenerg-6011	25	27	the	the	DET
fuelectenerg-6011	25	28	floating	float	VERB
fuelectenerg-6011	25	29	gate	gate	NOUN
fuelectenerg-6011	25	30	and	and	CCONJ
fuelectenerg-6011	25	31	control	control	PROPN
fuelectenerg-6011	25	32	gate	gate	PROPN
fuelectenerg-6011	25	33	are	be	AUX
fuelectenerg-6011	25	34	usually	usually	ADV
fuelectenerg-6011	25	35	made	make	VERB
fuelectenerg-6011	25	36	of	of	ADP
fuelectenerg-6011	25	37	polysilicon	polysilicon	NOUN
fuelectenerg-6011	25	38	.	.	PUNCT
fuelectenerg-6011	26	1	the	the	DET
fuelectenerg-6011	26	2	tunneling	tunneling	NOUN
fuelectenerg-6011	26	3	barrier	barrier	NOUN
fuelectenerg-6011	26	4	and	and	CCONJ
fuelectenerg-6011	26	5	the	the	DET
fuelectenerg-6011	26	6	blocking	block	VERB
fuelectenerg-6011	26	7	oxide	oxide	NOUN
fuelectenerg-6011	26	8	are	be	AUX
fuelectenerg-6011	26	9	typically	typically	ADV
fuelectenerg-6011	26	10	composed	compose	VERB
fuelectenerg-6011	26	11	of	of	ADP
fuelectenerg-6011	26	12	sio2	sio2	PROPN
fuelectenerg-6011	26	13	and	and	CCONJ
fuelectenerg-6011	26	14	oxidenitride	oxidenitride	ADJ
fuelectenerg-6011	26	15	-	-	PUNCT
fuelectenerg-6011	26	16	oxide	oxide	NOUN
fuelectenerg-6011	26	17	(	(	PUNCT
fuelectenerg-6011	26	18	ono	ono	PROPN
fuelectenerg-6011	26	19	)	)	PUNCT
fuelectenerg-6011	26	20	respectively	respectively	ADV
fuelectenerg-6011	26	21	.	.	PUNCT
fuelectenerg-6011	27	1	floating	float	VERB
fuelectenerg-6011	27	2	gate	gate	NOUN
fuelectenerg-6011	27	3	acts	act	VERB
fuelectenerg-6011	27	4	as	as	ADP
fuelectenerg-6011	27	5	a	a	DET
fuelectenerg-6011	27	6	potential	potential	ADJ
fuelectenerg-6011	27	7	well	well	INTJ
fuelectenerg-6011	27	8	and	and	CCONJ
fuelectenerg-6011	27	9	once	once	ADV
fuelectenerg-6011	27	10	the	the	DET
fuelectenerg-6011	27	11	charges	charge	NOUN
fuelectenerg-6011	27	12	are	be	AUX
fuelectenerg-6011	27	13	injected	inject	VERB
fuelectenerg-6011	27	14	into	into	ADP
fuelectenerg-6011	27	15	the	the	DET
fuelectenerg-6011	27	16	potential	potential	ADJ
fuelectenerg-6011	27	17	well	well	INTJ
fuelectenerg-6011	27	18	,	,	PUNCT
fuelectenerg-6011	27	19	it	it	PRON
fuelectenerg-6011	27	20	can	can	AUX
fuelectenerg-6011	27	21	not	not	PART
fuelectenerg-6011	27	22	move	move	VERB
fuelectenerg-6011	27	23	without	without	ADP
fuelectenerg-6011	27	24	external	external	ADJ
fuelectenerg-6011	27	25	electric	electric	ADJ
fuelectenerg-6011	27	26	field	field	NOUN
fuelectenerg-6011	27	27	.	.	PUNCT
fuelectenerg-6011	28	1	the	the	DET
fuelectenerg-6011	28	2	programming	programming	NOUN
fuelectenerg-6011	28	3	and	and	CCONJ
fuelectenerg-6011	28	4	erasing	erasing	NOUN
fuelectenerg-6011	28	5	of	of	ADP
fuelectenerg-6011	28	6	the	the	DET
fuelectenerg-6011	28	7	memory	memory	NOUN
fuelectenerg-6011	28	8	cell	cell	NOUN
fuelectenerg-6011	28	9	is	be	AUX
fuelectenerg-6011	28	10	carried	carry	VERB
fuelectenerg-6011	28	11	out	out	ADP
fuelectenerg-6011	28	12	by	by	ADP
fuelectenerg-6011	28	13	applying	apply	VERB
fuelectenerg-6011	28	14	positive	positive	ADJ
fuelectenerg-6011	28	15	and	and	CCONJ
fuelectenerg-6011	28	16	negative	negative	ADJ
fuelectenerg-6011	28	17	electric	electric	ADJ
fuelectenerg-6011	28	18	field	field	NOUN
fuelectenerg-6011	28	19	to	to	ADP
fuelectenerg-6011	28	20	the	the	DET
fuelectenerg-6011	28	21	control	control	NOUN
fuelectenerg-6011	28	22	gate	gate	NOUN
fuelectenerg-6011	28	23	respectively	respectively	ADV
fuelectenerg-6011	28	24	.	.	PUNCT
fuelectenerg-6011	29	1	si	si	PROPN
fuelectenerg-6011	29	2	has	have	AUX
fuelectenerg-6011	29	3	been	be	AUX
fuelectenerg-6011	29	4	used	use	VERB
fuelectenerg-6011	29	5	in	in	ADP
fuelectenerg-6011	29	6	mos	mos	PROPN
fuelectenerg-6011	29	7	technology	technology	NOUN
fuelectenerg-6011	29	8	for	for	ADP
fuelectenerg-6011	29	9	many	many	ADJ
fuelectenerg-6011	29	10	decades	decade	NOUN
fuelectenerg-6011	29	11	because	because	SCONJ
fuelectenerg-6011	29	12	of	of	ADP
fuelectenerg-6011	29	13	the	the	DET
fuelectenerg-6011	29	14	better	well	ADJ
fuelectenerg-6011	29	15	qualities	quality	NOUN
fuelectenerg-6011	29	16	of	of	ADP
fuelectenerg-6011	29	17	its	its	PRON
fuelectenerg-6011	29	18	native	native	ADJ
fuelectenerg-6011	29	19	oxide	oxide	NOUN
fuelectenerg-6011	29	20	[	[	X
fuelectenerg-6011	29	21	3	3	NUM
fuelectenerg-6011	29	22	]	]	PUNCT
fuelectenerg-6011	29	23	.	.	PUNCT
fuelectenerg-6011	30	1	in	in	ADP
fuelectenerg-6011	30	2	advanced	advanced	ADJ
fuelectenerg-6011	30	3	semiconductor	semiconductor	NOUN
fuelectenerg-6011	30	4	technology	technology	NOUN
fuelectenerg-6011	30	5	,	,	PUNCT
fuelectenerg-6011	30	6	the	the	DET
fuelectenerg-6011	30	7	transistor	transistor	NOUN
fuelectenerg-6011	30	8	gate	gate	NOUN
fuelectenerg-6011	30	9	length	length	NOUN
fuelectenerg-6011	30	10	will	will	AUX
fuelectenerg-6011	30	11	continue	continue	VERB
fuelectenerg-6011	30	12	to	to	PART
fuelectenerg-6011	30	13	shrink	shrink	VERB
fuelectenerg-6011	30	14	in	in	ADP
fuelectenerg-6011	30	15	order	order	NOUN
fuelectenerg-6011	30	16	to	to	PART
fuelectenerg-6011	30	17	achieve	achieve	VERB
fuelectenerg-6011	30	18	faster	fast	ADV
fuelectenerg-6011	30	19	switching	switch	VERB
fuelectenerg-6011	30	20	speed	speed	NOUN
fuelectenerg-6011	30	21	and	and	CCONJ
fuelectenerg-6011	30	22	high	high	ADJ
fuelectenerg-6011	30	23	device	device	NOUN
fuelectenerg-6011	30	24	density	density	NOUN
fuelectenerg-6011	30	25	.	.	PUNCT
fuelectenerg-6011	31	1	this	this	DET
fuelectenerg-6011	31	2	results	result	VERB
fuelectenerg-6011	31	3	in	in	ADP
fuelectenerg-6011	31	4	reduction	reduction	NOUN
fuelectenerg-6011	31	5	of	of	ADP
fuelectenerg-6011	31	6	gate	gate	NOUN
fuelectenerg-6011	31	7	length	length	NOUN
fuelectenerg-6011	31	8	and	and	CCONJ
fuelectenerg-6011	31	9	gate	gate	NOUN
fuelectenerg-6011	31	10	oxide	oxide	NOUN
fuelectenerg-6011	31	11	thickness	thickness	NOUN
fuelectenerg-6011	31	12	to	to	ADP
fuelectenerg-6011	31	13	1.5	1.5	NUM
fuelectenerg-6011	31	14	nm	nm	NOUN
fuelectenerg-6011	31	15	and	and	CCONJ
fuelectenerg-6011	31	16	oxide	oxide	NOUN
fuelectenerg-6011	31	17	scaling	scale	VERB
fuelectenerg-6011	31	18	down	down	ADP
fuelectenerg-6011	31	19	to	to	ADP
fuelectenerg-6011	31	20	eot	eot	PROPN
fuelectenerg-6011	31	21	of	of	ADP
fuelectenerg-6011	31	22	approx	approx	PROPN
fuelectenerg-6011	31	23	.	.	PUNCT
fuelectenerg-6011	32	1	0.5	0.5	NUM
fuelectenerg-6011	32	2	nm	nm	NOUN
fuelectenerg-6011	32	3	is	be	AUX
fuelectenerg-6011	32	4	required	require	VERB
fuelectenerg-6011	32	5	[	[	X
fuelectenerg-6011	32	6	4	4	NUM
fuelectenerg-6011	32	7	]	]	PUNCT
fuelectenerg-6011	32	8	.	.	PUNCT
fuelectenerg-6011	33	1	as	as	SCONJ
fuelectenerg-6011	33	2	the	the	DET
fuelectenerg-6011	33	3	thickness	thickness	NOUN
fuelectenerg-6011	33	4	of	of	ADP
fuelectenerg-6011	33	5	sio2	sio2	PROPN
fuelectenerg-6011	33	6	shrinks	shrink	VERB
fuelectenerg-6011	33	7	below	below	ADP
fuelectenerg-6011	33	8	1.5	1.5	NUM
fuelectenerg-6011	33	9	nm	nm	NOUN
fuelectenerg-6011	33	10	,	,	PUNCT
fuelectenerg-6011	33	11	it	it	PRON
fuelectenerg-6011	33	12	is	be	AUX
fuelectenerg-6011	33	13	facing	face	VERB
fuelectenerg-6011	33	14	its	its	PRON
fuelectenerg-6011	33	15	physical	physical	ADJ
fuelectenerg-6011	33	16	limitations	limitation	NOUN
fuelectenerg-6011	33	17	because	because	SCONJ
fuelectenerg-6011	33	18	of	of	ADP
fuelectenerg-6011	33	19	gate	gate	NOUN
fuelectenerg-6011	33	20	dielectric	dielectric	PROPN
fuelectenerg-6011	33	21	leakage	leakage	PROPN
fuelectenerg-6011	33	22	current	current	ADJ
fuelectenerg-6011	33	23	and	and	CCONJ
fuelectenerg-6011	33	24	reliability	reliability	NOUN
fuelectenerg-6011	33	25	requirements	requirement	NOUN
fuelectenerg-6011	33	26	[	[	X
fuelectenerg-6011	33	27	5	5	NUM
fuelectenerg-6011	33	28	]	]	PUNCT
fuelectenerg-6011	33	29	.	.	PUNCT
fuelectenerg-6011	34	1	thus	thus	ADV
fuelectenerg-6011	34	2	there	there	PRON
fuelectenerg-6011	34	3	is	be	VERB
fuelectenerg-6011	34	4	a	a	DET
fuelectenerg-6011	34	5	need	need	NOUN
fuelectenerg-6011	34	6	for	for	ADP
fuelectenerg-6011	34	7	alternate	alternate	ADJ
fuelectenerg-6011	34	8	channel	channel	NOUN
fuelectenerg-6011	34	9	materials	material	NOUN
fuelectenerg-6011	34	10	that	that	PRON
fuelectenerg-6011	34	11	can	can	AUX
fuelectenerg-6011	34	12	enhance	enhance	VERB
fuelectenerg-6011	34	13	channel	channel	NOUN
fuelectenerg-6011	34	14	mobility	mobility	NOUN
fuelectenerg-6011	34	15	beyond	beyond	ADP
fuelectenerg-6011	34	16	the	the	DET
fuelectenerg-6011	34	17	physical	physical	ADJ
fuelectenerg-6011	34	18	limits	limit	NOUN
fuelectenerg-6011	34	19	of	of	ADP
fuelectenerg-6011	34	20	si	si	PROPN
fuelectenerg-6011	34	21	based	base	VERB
fuelectenerg-6011	34	22	mos	mos	PROPN
fuelectenerg-6011	34	23	devices	device	NOUN
fuelectenerg-6011	34	24	[	[	X
fuelectenerg-6011	34	25	6	6	NUM
fuelectenerg-6011	34	26	]	]	PUNCT
fuelectenerg-6011	34	27	.	.	PUNCT
fuelectenerg-6011	35	1	with	with	ADP
fuelectenerg-6011	35	2	the	the	DET
fuelectenerg-6011	35	3	decrease	decrease	NOUN
fuelectenerg-6011	35	4	in	in	ADP
fuelectenerg-6011	35	5	thickness	thickness	NOUN
fuelectenerg-6011	35	6	of	of	ADP
fuelectenerg-6011	35	7	tunnel	tunnel	NOUN
fuelectenerg-6011	35	8	dielectric	dielectric	NOUN
fuelectenerg-6011	35	9	,	,	PUNCT
fuelectenerg-6011	35	10	the	the	DET
fuelectenerg-6011	35	11	interface	interface	NOUN
fuelectenerg-6011	35	12	between	between	ADP
fuelectenerg-6011	35	13	si	si	PROPN
fuelectenerg-6011	35	14	and	and	CCONJ
fuelectenerg-6011	35	15	sio2	sio2	PROPN
fuelectenerg-6011	35	16	plays	play	VERB
fuelectenerg-6011	35	17	a	a	DET
fuelectenerg-6011	35	18	very	very	ADV
fuelectenerg-6011	35	19	important	important	ADJ
fuelectenerg-6011	35	20	role	role	NOUN
fuelectenerg-6011	35	21	in	in	ADP
fuelectenerg-6011	35	22	retaining	retain	VERB
fuelectenerg-6011	35	23	the	the	DET
fuelectenerg-6011	35	24	charge	charge	NOUN
fuelectenerg-6011	35	25	for	for	ADP
fuelectenerg-6011	35	26	the	the	DET
fuelectenerg-6011	35	27	long	long	ADJ
fuelectenerg-6011	35	28	time	time	NOUN
fuelectenerg-6011	35	29	.	.	PUNCT
fuelectenerg-6011	36	1	however	however	ADV
fuelectenerg-6011	36	2	,	,	PUNCT
fuelectenerg-6011	36	3	for	for	ADP
fuelectenerg-6011	36	4	a	a	DET
fuelectenerg-6011	36	5	very	very	ADV
fuelectenerg-6011	36	6	thin	thin	ADJ
fuelectenerg-6011	36	7	sio2	sio2	NOUN
fuelectenerg-6011	36	8	,	,	PUNCT
fuelectenerg-6011	36	9	it	it	PRON
fuelectenerg-6011	36	10	is	be	AUX
fuelectenerg-6011	36	11	impossible	impossible	ADJ
fuelectenerg-6011	36	12	to	to	PART
fuelectenerg-6011	36	13	have	have	VERB
fuelectenerg-6011	36	14	a	a	DET
fuelectenerg-6011	36	15	defect	defect	NOUN
fuelectenerg-6011	36	16	free	free	ADJ
fuelectenerg-6011	36	17	oxide	oxide	NOUN
fuelectenerg-6011	36	18	and	and	CCONJ
fuelectenerg-6011	36	19	even	even	ADV
fuelectenerg-6011	36	20	a	a	DET
fuelectenerg-6011	36	21	single	single	ADJ
fuelectenerg-6011	36	22	defect	defect	NOUN
fuelectenerg-6011	36	23	can	can	AUX
fuelectenerg-6011	36	24	cause	cause	VERB
fuelectenerg-6011	36	25	leakage	leakage	NOUN
fuelectenerg-6011	36	26	of	of	ADP
fuelectenerg-6011	36	27	charge	charge	NOUN
fuelectenerg-6011	36	28	stored	store	VERB
fuelectenerg-6011	36	29	in	in	ADP
fuelectenerg-6011	36	30	floating	float	VERB
fuelectenerg-6011	36	31	gate	gate	NOUN
fuelectenerg-6011	36	32	through	through	ADP
fuelectenerg-6011	36	33	the	the	DET
fuelectenerg-6011	36	34	tunnel	tunnel	NOUN
fuelectenerg-6011	36	35	oxide	oxide	NOUN
fuelectenerg-6011	36	36	.	.	PUNCT
fuelectenerg-6011	37	1	thus	thus	ADV
fuelectenerg-6011	37	2	,	,	PUNCT
fuelectenerg-6011	37	3	thinner	thin	ADJ
fuelectenerg-6011	37	4	tunnel	tunnel	NOUN
fuelectenerg-6011	37	5	dielectric	dielectric	NOUN
fuelectenerg-6011	37	6	would	would	AUX
fuelectenerg-6011	37	7	degrade	degrade	VERB
fuelectenerg-6011	37	8	the	the	DET
fuelectenerg-6011	37	9	charge	charge	NOUN
fuelectenerg-6011	37	10	retention	retention	NOUN
fuelectenerg-6011	37	11	.	.	PUNCT
fuelectenerg-6011	38	1	for	for	ADP
fuelectenerg-6011	38	2	instance	instance	NOUN
fuelectenerg-6011	38	3	,	,	PUNCT
fuelectenerg-6011	38	4	with	with	SCONJ
fuelectenerg-6011	38	5	2.3	2.3	NUM
fuelectenerg-6011	38	6	nm	nm	NOUN
fuelectenerg-6011	38	7	sio2	sio2	NOUN
fuelectenerg-6011	38	8	tunneling	tunneling	NOUN
fuelectenerg-6011	38	9	oxide	oxide	NOUN
fuelectenerg-6011	38	10	shows	show	VERB
fuelectenerg-6011	38	11	reasonable	reasonable	ADJ
fuelectenerg-6011	38	12	programming	programming	NOUN
fuelectenerg-6011	38	13	efficiency	efficiency	NOUN
fuelectenerg-6011	38	14	with	with	ADP
fuelectenerg-6011	38	15	fairly	fairly	ADV
fuelectenerg-6011	38	16	low	low	ADJ
fuelectenerg-6011	38	17	programming	programming	NOUN
fuelectenerg-6011	38	18	voltage	voltage	NOUN
fuelectenerg-6011	38	19	,	,	PUNCT
fuelectenerg-6011	38	20	but	but	CCONJ
fuelectenerg-6011	38	21	loose	loose	ADJ
fuelectenerg-6011	38	22	25	25	NUM
fuelectenerg-6011	38	23	%	%	NOUN
fuelectenerg-6011	38	24	of	of	ADP
fuelectenerg-6011	38	25	its	its	PRON
fuelectenerg-6011	38	26	stored	store	VERB
fuelectenerg-6011	38	27	charges	charge	NOUN
fuelectenerg-6011	38	28	in	in	ADP
fuelectenerg-6011	38	29	several	several	ADJ
fuelectenerg-6011	38	30	tens	ten	NOUN
fuelectenerg-6011	38	31	of	of	ADP
fuelectenerg-6011	38	32	seconds	second	NOUN
fuelectenerg-6011	39	1	[	[	X
fuelectenerg-6011	39	2	7	7	NUM
fuelectenerg-6011	39	3	]	]	PUNCT
fuelectenerg-6011	39	4	.	.	PUNCT
fuelectenerg-6011	40	1	to	to	PART
fuelectenerg-6011	40	2	overcome	overcome	VERB
fuelectenerg-6011	40	3	these	these	DET
fuelectenerg-6011	40	4	issues	issue	NOUN
fuelectenerg-6011	40	5	,	,	PUNCT
fuelectenerg-6011	40	6	sion	sion	NOUN
fuelectenerg-6011	40	7	(	(	PUNCT
fuelectenerg-6011	40	8	silicon	silicon	NOUN
fuelectenerg-6011	40	9	oxynitride	oxynitride	NOUN
fuelectenerg-6011	40	10	)	)	PUNCT
fuelectenerg-6011	40	11	and	and	CCONJ
fuelectenerg-6011	40	12	other	other	ADJ
fuelectenerg-6011	40	13	high	high	ADJ
fuelectenerg-6011	40	14	dielectric	dielectric	ADJ
fuelectenerg-6011	40	15	constant	constant	ADJ
fuelectenerg-6011	40	16	materials	material	NOUN
fuelectenerg-6011	40	17	with	with	ADP
fuelectenerg-6011	40	18	higher	high	ADJ
fuelectenerg-6011	40	19	physical	physical	ADJ
fuelectenerg-6011	40	20	thickness	thickness	NOUN
fuelectenerg-6011	40	21	are	be	AUX
fuelectenerg-6011	40	22	being	be	AUX
fuelectenerg-6011	40	23	used	use	VERB
fuelectenerg-6011	40	24	to	to	PART
fuelectenerg-6011	40	25	limit	limit	VERB
fuelectenerg-6011	40	26	the	the	DET
fuelectenerg-6011	40	27	leakage	leakage	NOUN
fuelectenerg-6011	40	28	current	current	NOUN
fuelectenerg-6011	40	29	while	while	SCONJ
fuelectenerg-6011	40	30	maintaining	maintain	VERB
fuelectenerg-6011	40	31	the	the	DET
fuelectenerg-6011	40	32	higher	high	ADJ
fuelectenerg-6011	40	33	capacitance	capacitance	NOUN
fuelectenerg-6011	40	34	values	value	NOUN
fuelectenerg-6011	40	35	of	of	ADP
fuelectenerg-6011	40	36	the	the	DET
fuelectenerg-6011	40	37	scaled	scale	VERB
fuelectenerg-6011	40	38	devices	device	NOUN
fuelectenerg-6011	40	39	.	.	PUNCT
fuelectenerg-6011	41	1	sion	sion	NOUN
fuelectenerg-6011	41	2	has	have	AUX
fuelectenerg-6011	41	3	been	be	AUX
fuelectenerg-6011	41	4	used	use	VERB
fuelectenerg-6011	41	5	as	as	ADP
fuelectenerg-6011	41	6	a	a	DET
fuelectenerg-6011	41	7	substitute	substitute	NOUN
fuelectenerg-6011	41	8	for	for	ADP
fuelectenerg-6011	41	9	sio2	sio2	NOUN
fuelectenerg-6011	41	10	because	because	SCONJ
fuelectenerg-6011	41	11	of	of	ADP
fuelectenerg-6011	41	12	its	its	PRON
fuelectenerg-6011	41	13	high	high	ADJ
fuelectenerg-6011	41	14	dielectric	dielectric	ADJ
fuelectenerg-6011	41	15	permittivity	permittivity	NOUN
fuelectenerg-6011	41	16	and	and	CCONJ
fuelectenerg-6011	41	17	low	low	ADJ
fuelectenerg-6011	41	18	density	density	NOUN
fuelectenerg-6011	41	19	of	of	ADP
fuelectenerg-6011	41	20	surface	surface	NOUN
fuelectenerg-6011	41	21	states	state	NOUN
fuelectenerg-6011	41	22	.	.	PUNCT
fuelectenerg-6011	42	1	in	in	ADP
fuelectenerg-6011	42	2	addition	addition	NOUN
fuelectenerg-6011	42	3	,	,	PUNCT
fuelectenerg-6011	42	4	by	by	ADP
fuelectenerg-6011	42	5	differing	differ	VERB
fuelectenerg-6011	42	6	o	o	PROPN
fuelectenerg-6011	42	7	/	/	SYM
fuelectenerg-6011	42	8	n	n	NOUN
fuelectenerg-6011	42	9	ratio	ratio	NOUN
fuelectenerg-6011	42	10	the	the	DET
fuelectenerg-6011	42	11	band	band	NOUN
fuelectenerg-6011	42	12	energy	energy	NOUN
fuelectenerg-6011	42	13	of	of	ADP
fuelectenerg-6011	42	14	sion	sion	NOUN
fuelectenerg-6011	42	15	can	can	AUX
fuelectenerg-6011	42	16	be	be	AUX
fuelectenerg-6011	42	17	tailored	tailor	VERB
fuelectenerg-6011	42	18	between	between	ADP
fuelectenerg-6011	42	19	5	5	NUM
fuelectenerg-6011	42	20	and	and	CCONJ
fuelectenerg-6011	42	21	9	9	NUM
fuelectenerg-6011	42	22	ev	ev	NOUN
fuelectenerg-6011	42	23	[	[	X
fuelectenerg-6011	42	24	8	8	NUM
fuelectenerg-6011	42	25	,	,	PUNCT
fuelectenerg-6011	42	26	9	9	NUM
fuelectenerg-6011	42	27	]	]	PUNCT
fuelectenerg-6011	42	28	.	.	PUNCT
fuelectenerg-6011	43	1	the	the	DET
fuelectenerg-6011	43	2	tunnel	tunnel	NOUN
fuelectenerg-6011	43	3	oxide	oxide	NOUN
fuelectenerg-6011	43	4	has	have	VERB
fuelectenerg-6011	43	5	the	the	DET
fuelectenerg-6011	43	6	most	most	ADV
fuelectenerg-6011	43	7	strict	strict	ADJ
fuelectenerg-6011	43	8	requirements	requirement	NOUN
fuelectenerg-6011	43	9	in	in	ADP
fuelectenerg-6011	43	10	a	a	DET
fuelectenerg-6011	43	11	flash	flash	NOUN
fuelectenerg-6011	43	12	cell	cell	NOUN
fuelectenerg-6011	43	13	with	with	ADP
fuelectenerg-6011	43	14	properties	property	NOUN
fuelectenerg-6011	43	15	summarized	summarize	VERB
fuelectenerg-6011	43	16	as	as	ADP
fuelectenerg-6011	43	17	under	under	ADV
fuelectenerg-6011	43	18	:	:	PUNCT
fuelectenerg-6011	43	19	a	a	X
fuelectenerg-6011	43	20	)	)	PUNCT
fuelectenerg-6011	43	21	it	it	PRON
fuelectenerg-6011	43	22	must	must	AUX
fuelectenerg-6011	43	23	provide	provide	VERB
fuelectenerg-6011	43	24	a	a	DET
fuelectenerg-6011	43	25	good	good	ADJ
fuelectenerg-6011	43	26	interface	interface	NOUN
fuelectenerg-6011	43	27	to	to	ADP
fuelectenerg-6011	43	28	the	the	DET
fuelectenerg-6011	43	29	silicon	silicon	NOUN
fuelectenerg-6011	43	30	channel	channel	NOUN
fuelectenerg-6011	43	31	for	for	ADP
fuelectenerg-6011	43	32	reliable	reliable	ADJ
fuelectenerg-6011	43	33	transistor	transistor	NOUN
fuelectenerg-6011	43	34	operation	operation	NOUN
fuelectenerg-6011	43	35	b	b	X
fuelectenerg-6011	43	36	)	)	PUNCT
fuelectenerg-6011	43	37	it	it	PRON
fuelectenerg-6011	43	38	should	should	AUX
fuelectenerg-6011	43	39	provide	provide	VERB
fuelectenerg-6011	43	40	efficient	efficient	ADJ
fuelectenerg-6011	43	41	charge	charge	NOUN
fuelectenerg-6011	43	42	transport	transport	NOUN
fuelectenerg-6011	43	43	either	either	CCONJ
fuelectenerg-6011	43	44	through	through	ADP
fuelectenerg-6011	43	45	tunneling	tunneling	NOUN
fuelectenerg-6011	43	46	or	or	CCONJ
fuelectenerg-6011	43	47	hot	hot	ADJ
fuelectenerg-6011	43	48	carrier	carrier	NOUN
fuelectenerg-6011	43	49	injection	injection	NOUN
fuelectenerg-6011	43	50	during	during	ADP
fuelectenerg-6011	43	51	the	the	DET
fuelectenerg-6011	43	52	programming	programming	NOUN
fuelectenerg-6011	43	53	and	and	CCONJ
fuelectenerg-6011	43	54	erase	erase	NOUN
fuelectenerg-6011	43	55	operations	operation	NOUN
fuelectenerg-6011	43	56	which	which	PRON
fuelectenerg-6011	43	57	allow	allow	VERB
fuelectenerg-6011	43	58	the	the	DET
fuelectenerg-6011	43	59	data	datum	NOUN
fuelectenerg-6011	43	60	to	to	PART
fuelectenerg-6011	43	61	be	be	AUX
fuelectenerg-6011	43	62	changed	change	VERB
fuelectenerg-6011	43	63	in	in	ADP
fuelectenerg-6011	43	64	the	the	DET
fuelectenerg-6011	43	65	memory	memory	NOUN
fuelectenerg-6011	43	66	cell	cell	NOUN
fuelectenerg-6011	43	67	c	c	NOUN
fuelectenerg-6011	43	68	)	)	PUNCT
fuelectenerg-6011	43	69	it	it	PRON
fuelectenerg-6011	43	70	should	should	AUX
fuelectenerg-6011	43	71	enable	enable	VERB
fuelectenerg-6011	43	72	years	year	NOUN
fuelectenerg-6011	43	73	of	of	ADP
fuelectenerg-6011	43	74	charge	charge	NOUN
fuelectenerg-6011	43	75	retention	retention	NOUN
fuelectenerg-6011	43	76	on	on	ADP
fuelectenerg-6011	43	77	the	the	DET
fuelectenerg-6011	43	78	floating	float	VERB
fuelectenerg-6011	43	79	gate	gate	NOUN
fuelectenerg-6011	43	80	[	[	X
fuelectenerg-6011	43	81	10	10	NUM
fuelectenerg-6011	43	82	]	]	PUNCT
fuelectenerg-6011	43	83	.	.	PUNCT
fuelectenerg-6011	44	1	the	the	DET
fuelectenerg-6011	44	2	conventional	conventional	ADJ
fuelectenerg-6011	44	3	polysilicon	polysilicon	NOUN
fuelectenerg-6011	44	4	floating	float	VERB
fuelectenerg-6011	44	5	gate	gate	NOUN
fuelectenerg-6011	44	6	structure	structure	NOUN
fuelectenerg-6011	44	7	suffers	suffer	VERB
fuelectenerg-6011	44	8	from	from	ADP
fuelectenerg-6011	44	9	various	various	ADJ
fuelectenerg-6011	44	10	disadvantages	disadvantage	NOUN
fuelectenerg-6011	44	11	like	like	ADP
fuelectenerg-6011	44	12	cell	cell	NOUN
fuelectenerg-6011	44	13	to	to	ADP
fuelectenerg-6011	44	14	cell	cell	NOUN
fuelectenerg-6011	44	15	interference	interference	NOUN
fuelectenerg-6011	44	16	when	when	SCONJ
fuelectenerg-6011	44	17	optimized	optimize	VERB
fuelectenerg-6011	44	18	for	for	ADP
fuelectenerg-6011	44	19	high	high	ADJ
fuelectenerg-6011	44	20	density	density	NOUN
fuelectenerg-6011	44	21	,	,	PUNCT
fuelectenerg-6011	44	22	high	high	ADJ
fuelectenerg-6011	44	23	leakage	leakage	NOUN
fuelectenerg-6011	44	24	current	current	NOUN
fuelectenerg-6011	44	25	through	through	ADP
fuelectenerg-6011	44	26	tunneling	tunneling	NOUN
fuelectenerg-6011	44	27	dielectric	dielectric	NOUN
fuelectenerg-6011	44	28	,	,	PUNCT
fuelectenerg-6011	44	29	programming	programming	NOUN
fuelectenerg-6011	44	30	current	current	NOUN
fuelectenerg-6011	44	31	become	become	VERB
fuelectenerg-6011	44	32	increasingly	increasingly	ADV
fuelectenerg-6011	44	33	ballistic	ballistic	ADJ
fuelectenerg-6011	44	34	and	and	CCONJ
fuelectenerg-6011	44	35	loss	loss	NOUN
fuelectenerg-6011	44	36	of	of	ADP
fuelectenerg-6011	44	37	gate	gate	NOUN
fuelectenerg-6011	44	38	coupling	coupling	NOUN
fuelectenerg-6011	44	39	factor	factor	NOUN
fuelectenerg-6011	44	40	.	.	PUNCT
fuelectenerg-6011	45	1	the	the	DET
fuelectenerg-6011	45	2	thickness	thickness	NOUN
fuelectenerg-6011	45	3	of	of	ADP
fuelectenerg-6011	45	4	ono	ono	PROPN
fuelectenerg-6011	45	5	is	be	AUX
fuelectenerg-6011	45	6	to	to	PART
fuelectenerg-6011	45	7	be	be	AUX
fuelectenerg-6011	45	8	reduced	reduce	VERB
fuelectenerg-6011	45	9	to	to	PART
fuelectenerg-6011	45	10	compensate	compensate	VERB
fuelectenerg-6011	45	11	for	for	ADP
fuelectenerg-6011	45	12	the	the	DET
fuelectenerg-6011	45	13	loss	loss	NOUN
fuelectenerg-6011	45	14	of	of	ADP
fuelectenerg-6011	45	15	gate	gate	NOUN
fuelectenerg-6011	45	16	coupling	coupling	NOUN
fuelectenerg-6011	45	17	factor	factor	NOUN
fuelectenerg-6011	45	18	.	.	PUNCT
fuelectenerg-6011	46	1	but	but	CCONJ
fuelectenerg-6011	46	2	when	when	SCONJ
fuelectenerg-6011	46	3	it	it	PRON
fuelectenerg-6011	46	4	is	be	AUX
fuelectenerg-6011	46	5	reduced	reduce	VERB
fuelectenerg-6011	46	6	below	below	ADP
fuelectenerg-6011	46	7	10	10	NUM
fuelectenerg-6011	46	8	nm	nm	NOUN
fuelectenerg-6011	46	9	,	,	PUNCT
fuelectenerg-6011	46	10	it	it	PRON
fuelectenerg-6011	46	11	would	would	AUX
fuelectenerg-6011	46	12	cause	cause	VERB
fuelectenerg-6011	46	13	increase	increase	NOUN
fuelectenerg-6011	46	14	in	in	ADP
fuelectenerg-6011	46	15	the	the	DET
fuelectenerg-6011	46	16	unwanted	unwanted	ADJ
fuelectenerg-6011	46	17	gate	gate	NOUN
fuelectenerg-6011	46	18	to	to	PART
fuelectenerg-6011	46	19	gate	gate	VERB
fuelectenerg-6011	46	20	tunneling	tunneling	NOUN
fuelectenerg-6011	46	21	and	and	CCONJ
fuelectenerg-6011	46	22	degrade	degrade	VERB
fuelectenerg-6011	46	23	the	the	DET
fuelectenerg-6011	46	24	retention	retention	NOUN
fuelectenerg-6011	46	25	characteristics	characteristic	NOUN
fuelectenerg-6011	46	26	of	of	ADP
fuelectenerg-6011	46	27	memory	memory	NOUN
fuelectenerg-6011	46	28	devices	device	NOUN
fuelectenerg-6011	46	29	.	.	PUNCT
fuelectenerg-6011	47	1	the	the	DET
fuelectenerg-6011	47	2	possible	possible	ADJ
fuelectenerg-6011	47	3	route	route	NOUN
fuelectenerg-6011	47	4	to	to	PART
fuelectenerg-6011	47	5	eliminate	eliminate	VERB
fuelectenerg-6011	47	6	this	this	DET
fuelectenerg-6011	47	7	problem	problem	NOUN
fuelectenerg-6011	47	8	is	be	AUX
fuelectenerg-6011	47	9	to	to	PART
fuelectenerg-6011	47	10	use	use	VERB
fuelectenerg-6011	47	11	high	high	ADJ
fuelectenerg-6011	47	12	-	-	PUNCT
fuelectenerg-6011	47	13	k	k	NOUN
fuelectenerg-6011	47	14	based	base	VERB
fuelectenerg-6011	47	15	interpoly	interpoly	NOUN
fuelectenerg-6011	47	16	dielectric	dielectric	NOUN
fuelectenerg-6011	47	17	and	and	CCONJ
fuelectenerg-6011	47	18	to	to	PART
fuelectenerg-6011	47	19	replace	replace	VERB
fuelectenerg-6011	47	20	the	the	DET
fuelectenerg-6011	47	21	polysilicon	polysilicon	NOUN
fuelectenerg-6011	47	22	floating	float	VERB
fuelectenerg-6011	47	23	gate	gate	NOUN
fuelectenerg-6011	47	24	with	with	ADP
fuelectenerg-6011	47	25	a	a	DET
fuelectenerg-6011	47	26	metal	metal	NOUN
fuelectenerg-6011	47	27	floating	float	VERB
fuelectenerg-6011	47	28	gate	gate	NOUN
fuelectenerg-6011	47	29	.	.	PUNCT
fuelectenerg-6011	48	1	the	the	DET
fuelectenerg-6011	48	2	added	add	VERB
fuelectenerg-6011	48	3	benefits	benefit	NOUN
fuelectenerg-6011	48	4	of	of	ADP
fuelectenerg-6011	48	5	incorporating	incorporate	VERB
fuelectenerg-6011	48	6	a	a	DET
fuelectenerg-6011	48	7	metal	metal	NOUN
fuelectenerg-6011	48	8	floating	float	VERB
fuelectenerg-6011	48	9	gate	gate	NOUN
fuelectenerg-6011	48	10	include	include	VERB
fuelectenerg-6011	48	11	work	work	NOUN
fuelectenerg-6011	48	12	function	function	NOUN
fuelectenerg-6011	48	13	tunability	tunability	NOUN
fuelectenerg-6011	48	14	,	,	PUNCT
fuelectenerg-6011	48	15	higher	high	ADJ
fuelectenerg-6011	48	16	density	density	NOUN
fuelectenerg-6011	48	17	of	of	ADP
fuelectenerg-6011	48	18	states	state	NOUN
fuelectenerg-6011	48	19	and	and	CCONJ
fuelectenerg-6011	48	20	most	most	ADV
fuelectenerg-6011	48	21	importantly	importantly	ADV
fuelectenerg-6011	48	22	the	the	DET
fuelectenerg-6011	48	23	lower	low	ADJ
fuelectenerg-6011	48	24	ballistic	ballistic	ADJ
fuelectenerg-6011	48	25	transport	transport	NOUN
fuelectenerg-6011	48	26	.	.	PUNCT
fuelectenerg-6011	49	1	the	the	DET
fuelectenerg-6011	49	2	lower	low	ADJ
fuelectenerg-6011	49	3	ballistic	ballistic	ADJ
fuelectenerg-6011	49	4	transport	transport	NOUN
fuelectenerg-6011	49	5	in	in	ADP
fuelectenerg-6011	49	6	case	case	NOUN
fuelectenerg-6011	49	7	of	of	ADP
fuelectenerg-6011	49	8	metals	metal	NOUN
fuelectenerg-6011	49	9	is	be	AUX
fuelectenerg-6011	49	10	a	a	DET
fuelectenerg-6011	49	11	beneficial	beneficial	ADJ
fuelectenerg-6011	49	12	factor	factor	NOUN
fuelectenerg-6011	49	13	in	in	ADP
fuelectenerg-6011	49	14	scaling	scale	VERB
fuelectenerg-6011	49	15	down	down	ADP
fuelectenerg-6011	49	16	the	the	DET
fuelectenerg-6011	49	17	floating	float	VERB
fuelectenerg-6011	49	18	gate	gate	NOUN
fuelectenerg-6011	49	19	thickness	thickness	NOUN
fuelectenerg-6011	49	20	to	to	PART
fuelectenerg-6011	49	21	realize	realize	VERB
fuelectenerg-6011	49	22	a	a	DET
fuelectenerg-6011	49	23	lower	low	ADJ
fuelectenerg-6011	49	24	cell	cell	NOUN
fuelectenerg-6011	49	25	-	-	PUNCT
fuelectenerg-6011	49	26	to	to	ADP
fuelectenerg-6011	49	27	-	-	PUNCT
fuelectenerg-6011	49	28	cell	cell	NOUN
fuelectenerg-6011	49	29	interference	interference	NOUN
fuelectenerg-6011	49	30	[	[	X
fuelectenerg-6011	49	31	11	11	NUM
fuelectenerg-6011	49	32	]	]	PUNCT
fuelectenerg-6011	49	33	.	.	PUNCT
fuelectenerg-6011	50	1	hf	hf	PROPN
fuelectenerg-6011	50	2	based	base	VERB
fuelectenerg-6011	50	3	high	high	ADJ
fuelectenerg-6011	50	4	-	-	PUNCT
fuelectenerg-6011	50	5	k	k	NOUN
fuelectenerg-6011	50	6	dielectrics	dielectric	NOUN
fuelectenerg-6011	50	7	in	in	ADP
fuelectenerg-6011	50	8	combination	combination	NOUN
fuelectenerg-6011	50	9	with	with	ADP
fuelectenerg-6011	50	10	metal	metal	NOUN
fuelectenerg-6011	50	11	floating	float	VERB
fuelectenerg-6011	50	12	gate	gate	NOUN
fuelectenerg-6011	50	13	demonstrated	demonstrate	VERB
fuelectenerg-6011	50	14	excellent	excellent	ADJ
fuelectenerg-6011	50	15	memory	memory	NOUN
fuelectenerg-6011	50	16	characteristics	characteristic	NOUN
fuelectenerg-6011	50	17	[	[	X
fuelectenerg-6011	50	18	12	12	NUM
fuelectenerg-6011	50	19	]	]	PUNCT
fuelectenerg-6011	50	20	.	.	PUNCT
fuelectenerg-6011	51	1	therefore	therefore	ADV
fuelectenerg-6011	51	2	,	,	PUNCT
fuelectenerg-6011	51	3	the	the	DET
fuelectenerg-6011	51	4	ultra	ultra	ADJ
fuelectenerg-6011	51	5	-	-	ADJ
fuelectenerg-6011	51	6	thin	thin	ADJ
fuelectenerg-6011	51	7	metal	metal	NOUN
fuelectenerg-6011	51	8	floating	float	VERB
fuelectenerg-6011	51	9	gate	gate	NOUN
fuelectenerg-6011	51	10	is	be	AUX
fuelectenerg-6011	51	11	a	a	DET
fuelectenerg-6011	51	12	promising	promising	ADJ
fuelectenerg-6011	51	13	candidate	candidate	NOUN
fuelectenerg-6011	51	14	for	for	ADP
fuelectenerg-6011	51	15	future	future	NOUN
fuelectenerg-6011	51	16	scaled	scale	VERB
fuelectenerg-6011	51	17	nor	nor	CCONJ
fuelectenerg-6011	51	18	and	and	CCONJ
fuelectenerg-6011	51	19	nand	nand	VERB
fuelectenerg-6011	51	20	flash	flash	NOUN
fuelectenerg-6011	51	21	memories	memory	NOUN
fuelectenerg-6011	51	22	.	.	PUNCT
fuelectenerg-6011	52	1	158	158	NUM
fuelectenerg-6011	52	2	r.	r.	PROPN
fuelectenerg-6011	52	3	rajput	rajput	PROPN
fuelectenerg-6011	52	4	,	,	PUNCT
fuelectenerg-6011	52	5	r.	r.	PROPN
fuelectenerg-6011	52	6	vaid	vaid	PROPN
fuelectenerg-6011	52	7	table	table	NOUN
fuelectenerg-6011	52	8	1	1	NUM
fuelectenerg-6011	52	9	scaling	scale	VERB
fuelectenerg-6011	52	10	projections	projection	NOUN
fuelectenerg-6011	52	11	for	for	ADP
fuelectenerg-6011	52	12	floating	float	VERB
fuelectenerg-6011	52	13	-	-	PUNCT
fuelectenerg-6011	52	14	gate	gate	NOUN
fuelectenerg-6011	52	15	nor	nor	CCONJ
fuelectenerg-6011	52	16	flash	flash	VERB
fuelectenerg-6011	52	17	by	by	ADP
fuelectenerg-6011	52	18	international	international	ADJ
fuelectenerg-6011	52	19	technology	technology	NOUN
fuelectenerg-6011	52	20	roadmap	roadmap	NOUN
fuelectenerg-6011	52	21	for	for	ADP
fuelectenerg-6011	52	22	semiconductors	semiconductor	NOUN
fuelectenerg-6011	52	23	(	(	PUNCT
fuelectenerg-6011	52	24	itrs	itrs	ADJ
fuelectenerg-6011	52	25	)	)	PUNCT
fuelectenerg-6011	53	1	[	[	X
fuelectenerg-6011	53	2	2	2	X
fuelectenerg-6011	53	3	]	]	PUNCT
fuelectenerg-6011	53	4	nor	nor	CCONJ
fuelectenerg-6011	53	5	flash	flash	VERB
fuelectenerg-6011	53	6	nor	nor	CCONJ
fuelectenerg-6011	53	7	flash	flash	NOUN
fuelectenerg-6011	53	8	technology	technology	NOUN
fuelectenerg-6011	53	9	node	node	NOUN
fuelectenerg-6011	53	10	-	-	PUNCT
fuelectenerg-6011	53	11	f	f	PROPN
fuelectenerg-6011	53	12	(	(	PUNCT
fuelectenerg-6011	53	13	nm	nm	NOUN
fuelectenerg-6011	53	14	)	)	PUNCT
fuelectenerg-6011	53	15	gate	gate	NOUN
fuelectenerg-6011	53	16	length	length	PROPN
fuelectenerg-6011	53	17	physical	physical	PROPN
fuelectenerg-6011	53	18	(	(	PUNCT
fuelectenerg-6011	53	19	nm	nm	NOUN
fuelectenerg-6011	53	20	)	)	PUNCT
fuelectenerg-6011	53	21	tunnel	tunnel	NOUN
fuelectenerg-6011	53	22	oxide	oxide	NOUN
fuelectenerg-6011	53	23	thickness	thickness	NOUN
fuelectenerg-6011	53	24	(	(	PUNCT
fuelectenerg-6011	53	25	nm	nm	NOUN
fuelectenerg-6011	53	26	)	)	PUNCT
fuelectenerg-6011	53	27	interpoly	interpoly	ADJ
fuelectenerg-6011	53	28	dielectric	dielectric	NOUN
fuelectenerg-6011	53	29	material	material	NOUN
fuelectenerg-6011	53	30	interpoly	interpoly	NOUN
fuelectenerg-6011	53	31	dielectric	dielectric	PROPN
fuelectenerg-6011	53	32	thickness	thickness	PROPN
fuelectenerg-6011	53	33	eot	eot	PROPN
fuelectenerg-6011	53	34	(	(	PUNCT
fuelectenerg-6011	53	35	nm	nm	NOUN
fuelectenerg-6011	53	36	)	)	PUNCT
fuelectenerg-6011	53	37	gate	gate	NOUN
fuelectenerg-6011	53	38	coupling	coupling	NOUN
fuelectenerg-6011	53	39	ratio	ratio	NOUN
fuelectenerg-6011	53	40	retention	retention	NOUN
fuelectenerg-6011	53	41	(	(	PUNCT
fuelectenerg-6011	53	42	years	year	NOUN
fuelectenerg-6011	53	43	)	)	PUNCT
fuelectenerg-6011	53	44	2011	2011	NUM
fuelectenerg-6011	53	45	40	40	NUM
fuelectenerg-6011	53	46	100	100	NUM
fuelectenerg-6011	53	47	8	8	NUM
fuelectenerg-6011	53	48	-	-	SYM
fuelectenerg-6011	53	49	9	9	NUM
fuelectenerg-6011	53	50	ono	ono	NOUN
fuelectenerg-6011	53	51	13	13	NUM
fuelectenerg-6011	53	52	-	-	SYM
fuelectenerg-6011	53	53	15	15	NUM
fuelectenerg-6011	53	54	0.6	0.6	NUM
fuelectenerg-6011	53	55	-	-	SYM
fuelectenerg-6011	53	56	0.7	0.7	NUM
fuelectenerg-6011	53	57	10	10	NUM
fuelectenerg-6011	53	58	-	-	SYM
fuelectenerg-6011	53	59	20	20	NUM
fuelectenerg-6011	53	60	2012	2012	NUM
fuelectenerg-6011	53	61	35	35	NUM
fuelectenerg-6011	53	62	100	100	NUM
fuelectenerg-6011	53	63	8	8	NUM
fuelectenerg-6011	53	64	-	-	SYM
fuelectenerg-6011	53	65	9	9	NUM
fuelectenerg-6011	53	66	ono	ono	NOUN
fuelectenerg-6011	53	67	13	13	NUM
fuelectenerg-6011	53	68	-	-	SYM
fuelectenerg-6011	53	69	15	15	NUM
fuelectenerg-6011	53	70	0.6	0.6	NUM
fuelectenerg-6011	53	71	-	-	SYM
fuelectenerg-6011	53	72	0.7	0.7	NUM
fuelectenerg-6011	53	73	10	10	NUM
fuelectenerg-6011	53	74	-	-	SYM
fuelectenerg-6011	53	75	20	20	NUM
fuelectenerg-6011	53	76	2013	2013	NUM
fuelectenerg-6011	53	77	32	32	NUM
fuelectenerg-6011	53	78	90	90	NUM
fuelectenerg-6011	53	79	8	8	NUM
fuelectenerg-6011	53	80	high	high	ADJ
fuelectenerg-6011	53	81	-	-	PUNCT
fuelectenerg-6011	53	82	k	k	NOUN
fuelectenerg-6011	53	83	8	8	NUM
fuelectenerg-6011	53	84	-	-	SYM
fuelectenerg-6011	53	85	10	10	NUM
fuelectenerg-6011	53	86	0.6	0.6	NUM
fuelectenerg-6011	53	87	-	-	SYM
fuelectenerg-6011	53	88	0.7	0.7	NUM
fuelectenerg-6011	53	89	20	20	NUM
fuelectenerg-6011	53	90	2014	2014	NUM
fuelectenerg-6011	53	91	28	28	NUM
fuelectenerg-6011	53	92	90	90	NUM
fuelectenerg-6011	53	93	8	8	NUM
fuelectenerg-6011	53	94	high	high	ADJ
fuelectenerg-6011	53	95	-	-	PUNCT
fuelectenerg-6011	53	96	k	k	NOUN
fuelectenerg-6011	53	97	8	8	NUM
fuelectenerg-6011	53	98	-	-	SYM
fuelectenerg-6011	53	99	10	10	NUM
fuelectenerg-6011	53	100	0.6	0.6	NUM
fuelectenerg-6011	53	101	-	-	SYM
fuelectenerg-6011	53	102	0.7	0.7	NUM
fuelectenerg-6011	53	103	20	20	NUM
fuelectenerg-6011	53	104	2015	2015	NUM
fuelectenerg-6011	53	105	25	25	NUM
fuelectenerg-6011	53	106	90	90	NUM
fuelectenerg-6011	53	107	8	8	NUM
fuelectenerg-6011	53	108	high	high	ADJ
fuelectenerg-6011	53	109	-	-	PUNCT
fuelectenerg-6011	53	110	k	k	NOUN
fuelectenerg-6011	53	111	8	8	NUM
fuelectenerg-6011	53	112	-	-	SYM
fuelectenerg-6011	53	113	10	10	NUM
fuelectenerg-6011	53	114	0.6	0.6	NUM
fuelectenerg-6011	53	115	-	-	SYM
fuelectenerg-6011	53	116	0.7	0.7	NUM
fuelectenerg-6011	53	117	20	20	NUM
fuelectenerg-6011	53	118	2016	2016	NUM
fuelectenerg-6011	53	119	22	22	NUM
fuelectenerg-6011	53	120	(	(	PUNCT
fuelectenerg-6011	53	121	‽	‽	PROPN
fuelectenerg-6011	53	122	)	)	PUNCT
fuelectenerg-6011	53	123	(	(	PUNCT
fuelectenerg-6011	53	124	‽	‽	PROPN
fuelectenerg-6011	53	125	)	)	PUNCT
fuelectenerg-6011	53	126	high	high	PROPN
fuelectenerg-6011	53	127	-	-	PUNCT
fuelectenerg-6011	53	128	k	k	NOUN
fuelectenerg-6011	53	129	8	8	NUM
fuelectenerg-6011	53	130	-	-	SYM
fuelectenerg-6011	53	131	10	10	NUM
fuelectenerg-6011	53	132	0.6	0.6	NUM
fuelectenerg-6011	53	133	-	-	SYM
fuelectenerg-6011	53	134	0.7	0.7	NUM
fuelectenerg-6011	53	135	20	20	NUM
fuelectenerg-6011	53	136	2017	2017	NUM
fuelectenerg-6011	53	137	20	20	NUM
fuelectenerg-6011	53	138	(	(	PUNCT
fuelectenerg-6011	53	139	‽	‽	PROPN
fuelectenerg-6011	53	140	)	)	PUNCT
fuelectenerg-6011	53	141	(	(	PUNCT
fuelectenerg-6011	53	142	‽	‽	PROPN
fuelectenerg-6011	53	143	)	)	PUNCT
fuelectenerg-6011	53	144	high	high	PROPN
fuelectenerg-6011	53	145	-	-	PUNCT
fuelectenerg-6011	53	146	k	k	NOUN
fuelectenerg-6011	53	147	8	8	NUM
fuelectenerg-6011	53	148	-	-	SYM
fuelectenerg-6011	53	149	10	10	NUM
fuelectenerg-6011	53	150	0.6	0.6	NUM
fuelectenerg-6011	53	151	-	-	SYM
fuelectenerg-6011	53	152	0.7	0.7	NUM
fuelectenerg-6011	53	153	20	20	NUM
fuelectenerg-6011	53	154	2018	2018	NUM
fuelectenerg-6011	53	155	28	28	NUM
fuelectenerg-6011	53	156	(	(	PUNCT
fuelectenerg-6011	53	157	‽	‽	PROPN
fuelectenerg-6011	53	158	)	)	PUNCT
fuelectenerg-6011	53	159	(	(	PUNCT
fuelectenerg-6011	53	160	‽	‽	PROPN
fuelectenerg-6011	53	161	)	)	PUNCT
fuelectenerg-6011	53	162	high	high	PROPN
fuelectenerg-6011	53	163	-	-	PUNCT
fuelectenerg-6011	53	164	k	k	NOUN
fuelectenerg-6011	53	165	7	7	NUM
fuelectenerg-6011	53	166	-	-	SYM
fuelectenerg-6011	53	167	9	9	NUM
fuelectenerg-6011	53	168	0.6	0.6	NUM
fuelectenerg-6011	53	169	-	-	SYM
fuelectenerg-6011	53	170	0.7	0.7	NUM
fuelectenerg-6011	53	171	20	20	NUM
fuelectenerg-6011	53	172	2019	2019	NUM
fuelectenerg-6011	53	173	16	16	NUM
fuelectenerg-6011	53	174	(	(	PUNCT
fuelectenerg-6011	53	175	‽	‽	PROPN
fuelectenerg-6011	53	176	)	)	PUNCT
fuelectenerg-6011	53	177	(	(	PUNCT
fuelectenerg-6011	53	178	‽	‽	PROPN
fuelectenerg-6011	53	179	)	)	PUNCT
fuelectenerg-6011	53	180	high	high	PROPN
fuelectenerg-6011	53	181	-	-	PUNCT
fuelectenerg-6011	53	182	k	k	NOUN
fuelectenerg-6011	53	183	6	6	NUM
fuelectenerg-6011	53	184	-	-	SYM
fuelectenerg-6011	53	185	8	8	NUM
fuelectenerg-6011	53	186	0.6	0.6	NUM
fuelectenerg-6011	53	187	-	-	SYM
fuelectenerg-6011	53	188	0.7	0.7	NUM
fuelectenerg-6011	53	189	20	20	NUM
fuelectenerg-6011	53	190	2020	2020	NUM
fuelectenerg-6011	53	191	14	14	NUM
fuelectenerg-6011	53	192	(	(	PUNCT
fuelectenerg-6011	53	193	‽	‽	PROPN
fuelectenerg-6011	53	194	)	)	PUNCT
fuelectenerg-6011	53	195	(	(	PUNCT
fuelectenerg-6011	53	196	‽	‽	PROPN
fuelectenerg-6011	53	197	)	)	PUNCT
fuelectenerg-6011	53	198	high	high	PROPN
fuelectenerg-6011	53	199	-	-	PUNCT
fuelectenerg-6011	53	200	k	k	NOUN
fuelectenerg-6011	53	201	6	6	NUM
fuelectenerg-6011	53	202	-	-	SYM
fuelectenerg-6011	53	203	8	8	NUM
fuelectenerg-6011	53	204	0.6	0.6	NUM
fuelectenerg-6011	53	205	-	-	SYM
fuelectenerg-6011	53	206	0.7	0.7	NUM
fuelectenerg-6011	53	207	20	20	NUM
fuelectenerg-6011	53	208	2021	2021	NUM
fuelectenerg-6011	53	209	12	12	NUM
fuelectenerg-6011	53	210	(	(	PUNCT
fuelectenerg-6011	53	211	‽	‽	PROPN
fuelectenerg-6011	53	212	)	)	PUNCT
fuelectenerg-6011	53	213	(	(	PUNCT
fuelectenerg-6011	53	214	‽	‽	PROPN
fuelectenerg-6011	53	215	)	)	PUNCT
fuelectenerg-6011	53	216	high	high	PROPN
fuelectenerg-6011	53	217	-	-	PUNCT
fuelectenerg-6011	53	218	k	k	NOUN
fuelectenerg-6011	53	219	6	6	NUM
fuelectenerg-6011	53	220	-	-	SYM
fuelectenerg-6011	53	221	8	8	NUM
fuelectenerg-6011	53	222	0.6	0.6	NUM
fuelectenerg-6011	53	223	-	-	SYM
fuelectenerg-6011	53	224	0.7	0.7	NUM
fuelectenerg-6011	53	225	20	20	NUM
fuelectenerg-6011	53	226	2022	2022	NUM
fuelectenerg-6011	53	227	10	10	NUM
fuelectenerg-6011	53	228	(	(	PUNCT
fuelectenerg-6011	53	229	‽	‽	PROPN
fuelectenerg-6011	53	230	)	)	PUNCT
fuelectenerg-6011	53	231	(	(	PUNCT
fuelectenerg-6011	53	232	‽	‽	PROPN
fuelectenerg-6011	53	233	)	)	PUNCT
fuelectenerg-6011	53	234	high	high	PROPN
fuelectenerg-6011	53	235	-	-	PUNCT
fuelectenerg-6011	53	236	k	k	NOUN
fuelectenerg-6011	53	237	6	6	NUM
fuelectenerg-6011	53	238	-	-	SYM
fuelectenerg-6011	53	239	8	8	NUM
fuelectenerg-6011	53	240	0.6	0.6	NUM
fuelectenerg-6011	53	241	-	-	SYM
fuelectenerg-6011	53	242	0.7	0.7	NUM
fuelectenerg-6011	53	243	20	20	NUM
fuelectenerg-6011	53	244	2023	2023	NUM
fuelectenerg-6011	53	245	10	10	NUM
fuelectenerg-6011	53	246	(	(	PUNCT
fuelectenerg-6011	53	247	‽	‽	PROPN
fuelectenerg-6011	53	248	)	)	PUNCT
fuelectenerg-6011	53	249	(	(	PUNCT
fuelectenerg-6011	53	250	‽	‽	PROPN
fuelectenerg-6011	53	251	)	)	PUNCT
fuelectenerg-6011	53	252	high	high	PROPN
fuelectenerg-6011	53	253	-	-	PUNCT
fuelectenerg-6011	53	254	k	k	NOUN
fuelectenerg-6011	53	255	6	6	NUM
fuelectenerg-6011	53	256	-	-	SYM
fuelectenerg-6011	53	257	8	8	NUM
fuelectenerg-6011	53	258	0.6	0.6	NUM
fuelectenerg-6011	53	259	-	-	SYM
fuelectenerg-6011	53	260	0.7	0.7	NUM
fuelectenerg-6011	53	261	20	20	NUM
fuelectenerg-6011	53	262	2024	2024	NUM
fuelectenerg-6011	53	263	10	10	NUM
fuelectenerg-6011	53	264	(	(	PUNCT
fuelectenerg-6011	53	265	‽	‽	PROPN
fuelectenerg-6011	53	266	)	)	PUNCT
fuelectenerg-6011	53	267	(	(	PUNCT
fuelectenerg-6011	53	268	‽	‽	PROPN
fuelectenerg-6011	53	269	)	)	PUNCT
fuelectenerg-6011	53	270	high	high	PROPN
fuelectenerg-6011	53	271	-	-	PUNCT
fuelectenerg-6011	53	272	k	k	NOUN
fuelectenerg-6011	53	273	6	6	NUM
fuelectenerg-6011	53	274	-	-	SYM
fuelectenerg-6011	53	275	8	8	NUM
fuelectenerg-6011	53	276	0.6	0.6	NUM
fuelectenerg-6011	53	277	-	-	SYM
fuelectenerg-6011	53	278	0.7	0.7	NUM
fuelectenerg-6011	53	279	20	20	NUM
fuelectenerg-6011	53	280	table	table	NOUN
fuelectenerg-6011	53	281	2	2	NUM
fuelectenerg-6011	53	282	scaling	scale	VERB
fuelectenerg-6011	53	283	projections	projection	NOUN
fuelectenerg-6011	53	284	for	for	ADP
fuelectenerg-6011	53	285	floating	float	VERB
fuelectenerg-6011	53	286	-	-	PUNCT
fuelectenerg-6011	53	287	gate	gate	NOUN
fuelectenerg-6011	53	288	nand	nand	NOUN
fuelectenerg-6011	53	289	flash	flash	NOUN
fuelectenerg-6011	53	290	by	by	ADP
fuelectenerg-6011	53	291	international	international	ADJ
fuelectenerg-6011	53	292	technology	technology	NOUN
fuelectenerg-6011	53	293	roadmap	roadmap	NOUN
fuelectenerg-6011	53	294	for	for	ADP
fuelectenerg-6011	53	295	semiconductors	semiconductor	NOUN
fuelectenerg-6011	53	296	(	(	PUNCT
fuelectenerg-6011	53	297	itrs	itrs	ADJ
fuelectenerg-6011	53	298	)	)	PUNCT
fuelectenerg-6011	54	1	[	[	X
fuelectenerg-6011	54	2	2	2	X
fuelectenerg-6011	54	3	]	]	PUNCT
fuelectenerg-6011	54	4	initially	initially	ADV
fuelectenerg-6011	54	5	in	in	ADP
fuelectenerg-6011	54	6	1967	1967	NUM
fuelectenerg-6011	54	7	,	,	PUNCT
fuelectenerg-6011	54	8	charge	charge	NOUN
fuelectenerg-6011	54	9	-	-	PUNCT
fuelectenerg-6011	54	10	trapping	trap	VERB
fuelectenerg-6011	54	11	memory	memory	NOUN
fuelectenerg-6011	54	12	(	(	PUNCT
fuelectenerg-6011	54	13	ctm	ctm	ADJ
fuelectenerg-6011	54	14	)	)	PUNCT
fuelectenerg-6011	54	15	was	be	AUX
fuelectenerg-6011	54	16	introduced	introduce	VERB
fuelectenerg-6011	54	17	to	to	PART
fuelectenerg-6011	54	18	illustrate	illustrate	VERB
fuelectenerg-6011	54	19	some	some	DET
fuelectenerg-6011	54	20	eminent	eminent	ADJ
fuelectenerg-6011	54	21	advantages	advantage	NOUN
fuelectenerg-6011	54	22	over	over	ADP
fuelectenerg-6011	54	23	the	the	DET
fuelectenerg-6011	54	24	conventional	conventional	ADJ
fuelectenerg-6011	54	25	floating	float	VERB
fuelectenerg-6011	54	26	-	-	PUNCT
fuelectenerg-6011	54	27	gate	gate	NOUN
fuelectenerg-6011	54	28	counterpart	counterpart	NOUN
fuelectenerg-6011	55	1	[	[	X
fuelectenerg-6011	55	2	13	13	NUM
fuelectenerg-6011	55	3	]	]	PUNCT
fuelectenerg-6011	55	4	.	.	PUNCT
fuelectenerg-6011	56	1	recently	recently	ADV
fuelectenerg-6011	56	2	,	,	PUNCT
fuelectenerg-6011	56	3	floating	float	VERB
fuelectenerg-6011	56	4	gate	gate	NOUN
fuelectenerg-6011	56	5	memory	memory	NOUN
fuelectenerg-6011	56	6	devices	device	NOUN
fuelectenerg-6011	56	7	consisting	consist	VERB
fuelectenerg-6011	56	8	of	of	ADP
fuelectenerg-6011	56	9	discrete	discrete	ADJ
fuelectenerg-6011	56	10	metal	metal	NOUN
fuelectenerg-6011	56	11	nanocrystals	nanocrystal	NOUN
fuelectenerg-6011	56	12	have	have	AUX
fuelectenerg-6011	56	13	received	receive	VERB
fuelectenerg-6011	56	14	huge	huge	ADJ
fuelectenerg-6011	56	15	attention	attention	NOUN
fuelectenerg-6011	56	16	due	due	ADP
fuelectenerg-6011	56	17	to	to	ADP
fuelectenerg-6011	56	18	their	their	PRON
fuelectenerg-6011	56	19	excellent	excellent	ADJ
fuelectenerg-6011	56	20	memory	memory	NOUN
fuelectenerg-6011	56	21	performance	performance	NOUN
fuelectenerg-6011	56	22	and	and	CCONJ
fuelectenerg-6011	56	23	high	high	ADJ
fuelectenerg-6011	56	24	scalability	scalability	NOUN
fuelectenerg-6011	56	25	.	.	PUNCT
fuelectenerg-6011	57	1	memory	memory	NOUN
fuelectenerg-6011	57	2	devices	device	NOUN
fuelectenerg-6011	57	3	with	with	ADP
fuelectenerg-6011	57	4	nanocrystal	nanocrystal	ADJ
fuelectenerg-6011	57	5	floating	float	VERB
fuelectenerg-6011	57	6	-	-	PUNCT
fuelectenerg-6011	57	7	gate	gate	NOUN
fuelectenerg-6011	57	8	offer	offer	NOUN
fuelectenerg-6011	57	9	faster	fast	ADV
fuelectenerg-6011	57	10	write	write	VERB
fuelectenerg-6011	57	11	/	/	SYM
fuelectenerg-6011	57	12	erase	erase	NOUN
fuelectenerg-6011	57	13	speeds	speed	NOUN
fuelectenerg-6011	57	14	,	,	PUNCT
fuelectenerg-6011	57	15	lower	low	ADJ
fuelectenerg-6011	57	16	power	power	NOUN
fuelectenerg-6011	57	17	nand	nand	NOUN
fuelectenerg-6011	57	18	flash	flash	NOUN
fuelectenerg-6011	57	19	nand	nand	NOUN
fuelectenerg-6011	57	20	flash	flash	NOUN
fuelectenerg-6011	57	21	technology	technology	NOUN
fuelectenerg-6011	57	22	node	node	NOUN
fuelectenerg-6011	57	23	-	-	PUNCT
fuelectenerg-6011	57	24	f	f	PROPN
fuelectenerg-6011	57	25	(	(	PUNCT
fuelectenerg-6011	57	26	nm	nm	NOUN
fuelectenerg-6011	57	27	)	)	PUNCT
fuelectenerg-6011	57	28	tunnel	tunnel	NOUN
fuelectenerg-6011	57	29	oxide	oxide	NOUN
fuelectenerg-6011	57	30	thickness	thickness	NOUN
fuelectenerg-6011	57	31	(	(	PUNCT
fuelectenerg-6011	57	32	nm	nm	NOUN
fuelectenerg-6011	57	33	)	)	PUNCT
fuelectenerg-6011	57	34	interpoly	interpoly	ADJ
fuelectenerg-6011	57	35	dielectric	dielectric	NOUN
fuelectenerg-6011	57	36	material	material	NOUN
fuelectenerg-6011	57	37	interpoly	interpoly	NOUN
fuelectenerg-6011	57	38	dielectric	dielectric	PROPN
fuelectenerg-6011	57	39	thickness	thickness	PROPN
fuelectenerg-6011	57	40	eot	eot	PROPN
fuelectenerg-6011	57	41	(	(	PUNCT
fuelectenerg-6011	57	42	nm	nm	NOUN
fuelectenerg-6011	57	43	)	)	PUNCT
fuelectenerg-6011	57	44	control	control	PROPN
fuelectenerg-6011	57	45	gate	gate	PROPN
fuelectenerg-6011	57	46	material	material	PROPN
fuelectenerg-6011	57	47	gate	gate	PROPN
fuelectenerg-6011	57	48	coupling	couple	VERB
fuelectenerg-6011	57	49	ratio	ratio	NOUN
fuelectenerg-6011	57	50	retention	retention	NOUN
fuelectenerg-6011	57	51	(	(	PUNCT
fuelectenerg-6011	57	52	years	year	NOUN
fuelectenerg-6011	57	53	)	)	PUNCT
fuelectenerg-6011	57	54	2011	2011	NUM
fuelectenerg-6011	57	55	28	28	NUM
fuelectenerg-6011	57	56	6	6	NUM
fuelectenerg-6011	57	57	-	-	SYM
fuelectenerg-6011	57	58	7	7	NUM
fuelectenerg-6011	57	59	ono	ono	NOUN
fuelectenerg-6011	57	60	10	10	NUM
fuelectenerg-6011	57	61	-	-	SYM
fuelectenerg-6011	57	62	13	13	NUM
fuelectenerg-6011	57	63	n	n	CCONJ
fuelectenerg-6011	57	64	-	-	PUNCT
fuelectenerg-6011	57	65	poly	poly	ADJ
fuelectenerg-6011	57	66	0.6	0.6	NUM
fuelectenerg-6011	57	67	-	-	SYM
fuelectenerg-6011	57	68	0.7	0.7	NUM
fuelectenerg-6011	57	69	10	10	NUM
fuelectenerg-6011	57	70	-	-	SYM
fuelectenerg-6011	57	71	20	20	NUM
fuelectenerg-6011	57	72	2012	2012	NUM
fuelectenerg-6011	57	73	25	25	NUM
fuelectenerg-6011	57	74	6	6	NUM
fuelectenerg-6011	57	75	-	-	SYM
fuelectenerg-6011	57	76	7	7	NUM
fuelectenerg-6011	57	77	high	high	ADJ
fuelectenerg-6011	57	78	-	-	PUNCT
fuelectenerg-6011	57	79	k	k	NOUN
fuelectenerg-6011	57	80	9	9	NUM
fuelectenerg-6011	57	81	-	-	SYM
fuelectenerg-6011	57	82	10	10	NUM
fuelectenerg-6011	57	83	poly	poly	ADJ
fuelectenerg-6011	57	84	/	/	SYM
fuelectenerg-6011	57	85	metal	metal	NOUN
fuelectenerg-6011	57	86	0.6	0.6	NUM
fuelectenerg-6011	57	87	-	-	SYM
fuelectenerg-6011	57	88	0.7	0.7	NUM
fuelectenerg-6011	57	89	10	10	NUM
fuelectenerg-6011	57	90	-	-	SYM
fuelectenerg-6011	57	91	20	20	NUM
fuelectenerg-6011	57	92	2013	2013	NUM
fuelectenerg-6011	57	93	22	22	NUM
fuelectenerg-6011	57	94	6	6	NUM
fuelectenerg-6011	57	95	-	-	SYM
fuelectenerg-6011	57	96	7	7	NUM
fuelectenerg-6011	57	97	high	high	ADJ
fuelectenerg-6011	57	98	-	-	PUNCT
fuelectenerg-6011	57	99	k	k	NOUN
fuelectenerg-6011	57	100	9	9	NUM
fuelectenerg-6011	57	101	-	-	SYM
fuelectenerg-6011	57	102	10	10	NUM
fuelectenerg-6011	57	103	poly	poly	ADJ
fuelectenerg-6011	57	104	/	/	SYM
fuelectenerg-6011	57	105	metal	metal	NOUN
fuelectenerg-6011	57	106	0.6	0.6	NUM
fuelectenerg-6011	57	107	-	-	SYM
fuelectenerg-6011	57	108	0.7	0.7	NUM
fuelectenerg-6011	57	109	10	10	NUM
fuelectenerg-6011	57	110	-	-	SYM
fuelectenerg-6011	57	111	20	20	NUM
fuelectenerg-6011	57	112	2014	2014	NUM
fuelectenerg-6011	57	113	20	20	NUM
fuelectenerg-6011	57	114	6	6	NUM
fuelectenerg-6011	57	115	-	-	SYM
fuelectenerg-6011	57	116	7	7	NUM
fuelectenerg-6011	57	117	high	high	ADJ
fuelectenerg-6011	57	118	-	-	PUNCT
fuelectenerg-6011	57	119	k	k	NOUN
fuelectenerg-6011	57	120	9	9	NUM
fuelectenerg-6011	57	121	-	-	SYM
fuelectenerg-6011	57	122	10	10	NUM
fuelectenerg-6011	57	123	poly	poly	ADJ
fuelectenerg-6011	57	124	/	/	SYM
fuelectenerg-6011	57	125	metal	metal	NOUN
fuelectenerg-6011	57	126	0.6	0.6	NUM
fuelectenerg-6011	57	127	-	-	SYM
fuelectenerg-6011	57	128	0.7	0.7	NUM
fuelectenerg-6011	57	129	10	10	NUM
fuelectenerg-6011	57	130	2015	2015	NUM
fuelectenerg-6011	57	131	19	19	NUM
fuelectenerg-6011	57	132	6	6	NUM
fuelectenerg-6011	57	133	-	-	SYM
fuelectenerg-6011	57	134	7	7	NUM
fuelectenerg-6011	57	135	high	high	ADJ
fuelectenerg-6011	57	136	-	-	PUNCT
fuelectenerg-6011	57	137	k	k	NOUN
fuelectenerg-6011	57	138	9	9	NUM
fuelectenerg-6011	57	139	-	-	SYM
fuelectenerg-6011	57	140	10	10	NUM
fuelectenerg-6011	57	141	metal	metal	NOUN
fuelectenerg-6011	57	142	0.6	0.6	NUM
fuelectenerg-6011	57	143	-	-	SYM
fuelectenerg-6011	57	144	0.7	0.7	NUM
fuelectenerg-6011	57	145	5	5	NUM
fuelectenerg-6011	57	146	-	-	SYM
fuelectenerg-6011	57	147	10	10	NUM
fuelectenerg-6011	57	148	2016	2016	NUM
fuelectenerg-6011	57	149	18	18	NUM
fuelectenerg-6011	57	150	4	4	NUM
fuelectenerg-6011	57	151	high	high	ADJ
fuelectenerg-6011	57	152	-	-	PUNCT
fuelectenerg-6011	57	153	k	k	NOUN
fuelectenerg-6011	57	154	9	9	NUM
fuelectenerg-6011	57	155	-	-	SYM
fuelectenerg-6011	57	156	10	10	NUM
fuelectenerg-6011	57	157	metal	metal	NOUN
fuelectenerg-6011	57	158	0.6	0.6	NUM
fuelectenerg-6011	57	159	-	-	SYM
fuelectenerg-6011	57	160	0.7	0.7	NUM
fuelectenerg-6011	57	161	5	5	NUM
fuelectenerg-6011	57	162	-	-	SYM
fuelectenerg-6011	57	163	10	10	NUM
fuelectenerg-6011	57	164	2017	2017	NUM
fuelectenerg-6011	57	165	16	16	NUM
fuelectenerg-6011	57	166	4	4	NUM
fuelectenerg-6011	57	167	high	high	ADJ
fuelectenerg-6011	57	168	-	-	PUNCT
fuelectenerg-6011	57	169	k	k	NOUN
fuelectenerg-6011	57	170	9	9	NUM
fuelectenerg-6011	57	171	-	-	SYM
fuelectenerg-6011	57	172	10	10	NUM
fuelectenerg-6011	57	173	metal	metal	NOUN
fuelectenerg-6011	57	174	0.6	0.6	NUM
fuelectenerg-6011	57	175	-	-	SYM
fuelectenerg-6011	57	176	0.7	0.7	NUM
fuelectenerg-6011	57	177	5	5	NUM
fuelectenerg-6011	57	178	-	-	SYM
fuelectenerg-6011	57	179	10	10	NUM
fuelectenerg-6011	57	180	2018	2018	NUM
fuelectenerg-6011	57	181	14	14	NUM
fuelectenerg-6011	57	182	4	4	NUM
fuelectenerg-6011	57	183	high	high	ADJ
fuelectenerg-6011	57	184	-	-	PUNCT
fuelectenerg-6011	57	185	k	k	NOUN
fuelectenerg-6011	57	186	9	9	NUM
fuelectenerg-6011	57	187	-	-	SYM
fuelectenerg-6011	57	188	10	10	NUM
fuelectenerg-6011	57	189	metal	metal	NOUN
fuelectenerg-6011	57	190	0.6	0.6	NUM
fuelectenerg-6011	57	191	-	-	SYM
fuelectenerg-6011	57	192	0.7	0.7	NUM
fuelectenerg-6011	57	193	5	5	NUM
fuelectenerg-6011	57	194	-	-	SYM
fuelectenerg-6011	57	195	10	10	NUM
fuelectenerg-6011	57	196	2019	2019	NUM
fuelectenerg-6011	57	197	13	13	NUM
fuelectenerg-6011	57	198	4	4	NUM
fuelectenerg-6011	57	199	high	high	ADJ
fuelectenerg-6011	57	200	-	-	PUNCT
fuelectenerg-6011	57	201	k	k	NOUN
fuelectenerg-6011	57	202	8	8	NUM
fuelectenerg-6011	57	203	-	-	SYM
fuelectenerg-6011	57	204	10	10	NUM
fuelectenerg-6011	57	205	metal	metal	NOUN
fuelectenerg-6011	57	206	0.6	0.6	NUM
fuelectenerg-6011	57	207	-	-	SYM
fuelectenerg-6011	57	208	0.7	0.7	NUM
fuelectenerg-6011	57	209	5	5	NUM
fuelectenerg-6011	57	210	-	-	SYM
fuelectenerg-6011	57	211	10	10	NUM
fuelectenerg-6011	57	212	2020	2020	NUM
fuelectenerg-6011	57	213	12	12	NUM
fuelectenerg-6011	57	214	4	4	NUM
fuelectenerg-6011	57	215	high	high	ADJ
fuelectenerg-6011	57	216	-	-	PUNCT
fuelectenerg-6011	57	217	k	k	NOUN
fuelectenerg-6011	57	218	8	8	NUM
fuelectenerg-6011	57	219	-	-	SYM
fuelectenerg-6011	57	220	10	10	NUM
fuelectenerg-6011	57	221	metal	metal	NOUN
fuelectenerg-6011	57	222	0.6	0.6	NUM
fuelectenerg-6011	57	223	-	-	SYM
fuelectenerg-6011	57	224	0.7	0.7	NUM
fuelectenerg-6011	57	225	5	5	NUM
fuelectenerg-6011	57	226	-	-	SYM
fuelectenerg-6011	57	227	10	10	NUM
fuelectenerg-6011	57	228	2021	2021	NUM
fuelectenerg-6011	57	229	11	11	NUM
fuelectenerg-6011	57	230	4	4	NUM
fuelectenerg-6011	57	231	high	high	ADJ
fuelectenerg-6011	57	232	-	-	PUNCT
fuelectenerg-6011	57	233	k	k	NOUN
fuelectenerg-6011	57	234	8	8	NUM
fuelectenerg-6011	57	235	-	-	SYM
fuelectenerg-6011	57	236	10	10	NUM
fuelectenerg-6011	57	237	metal	metal	NOUN
fuelectenerg-6011	57	238	0.6	0.6	NUM
fuelectenerg-6011	57	239	-	-	SYM
fuelectenerg-6011	57	240	0.7	0.7	NUM
fuelectenerg-6011	57	241	5	5	NUM
fuelectenerg-6011	57	242	-	-	SYM
fuelectenerg-6011	57	243	10	10	NUM
fuelectenerg-6011	57	244	2022	2022	NUM
fuelectenerg-6011	57	245	9	9	NUM
fuelectenerg-6011	57	246	4	4	NUM
fuelectenerg-6011	57	247	high	high	ADJ
fuelectenerg-6011	57	248	-	-	PUNCT
fuelectenerg-6011	57	249	k	k	NOUN
fuelectenerg-6011	57	250	8	8	NUM
fuelectenerg-6011	57	251	-	-	SYM
fuelectenerg-6011	57	252	10	10	NUM
fuelectenerg-6011	57	253	metal	metal	NOUN
fuelectenerg-6011	57	254	0.6	0.6	NUM
fuelectenerg-6011	57	255	-	-	SYM
fuelectenerg-6011	57	256	0.7	0.7	NUM
fuelectenerg-6011	57	257	5	5	NUM
fuelectenerg-6011	57	258	-	-	SYM
fuelectenerg-6011	57	259	10	10	NUM
fuelectenerg-6011	57	260	2023	2023	NUM
fuelectenerg-6011	57	261	8	8	NUM
fuelectenerg-6011	57	262	4	4	NUM
fuelectenerg-6011	57	263	high	high	ADJ
fuelectenerg-6011	57	264	-	-	PUNCT
fuelectenerg-6011	57	265	k	k	NOUN
fuelectenerg-6011	57	266	8	8	NUM
fuelectenerg-6011	57	267	-	-	SYM
fuelectenerg-6011	57	268	10	10	NUM
fuelectenerg-6011	57	269	metal	metal	NOUN
fuelectenerg-6011	57	270	0.6	0.6	NUM
fuelectenerg-6011	57	271	-	-	SYM
fuelectenerg-6011	57	272	0.7	0.7	NUM
fuelectenerg-6011	57	273	5	5	NUM
fuelectenerg-6011	57	274	-	-	SYM
fuelectenerg-6011	57	275	10	10	NUM
fuelectenerg-6011	57	276	2024	2024	NUM
fuelectenerg-6011	57	277	8	8	NUM
fuelectenerg-6011	57	278	4	4	NUM
fuelectenerg-6011	57	279	high	high	ADJ
fuelectenerg-6011	57	280	-	-	PUNCT
fuelectenerg-6011	57	281	k	k	NOUN
fuelectenerg-6011	57	282	8	8	NUM
fuelectenerg-6011	57	283	-	-	SYM
fuelectenerg-6011	57	284	10	10	NUM
fuelectenerg-6011	57	285	metal	metal	NOUN
fuelectenerg-6011	57	286	0.6	0.6	NUM
fuelectenerg-6011	57	287	-	-	SYM
fuelectenerg-6011	57	288	0.7	0.7	NUM
fuelectenerg-6011	57	289	5	5	NUM
fuelectenerg-6011	57	290	-	-	SYM
fuelectenerg-6011	57	291	10	10	NUM
fuelectenerg-6011	57	292	flash	flash	NOUN
fuelectenerg-6011	57	293	memory	memory	NOUN
fuelectenerg-6011	57	294	devices	device	NOUN
fuelectenerg-6011	57	295	with	with	ADP
fuelectenerg-6011	57	296	metal	metal	NOUN
fuelectenerg-6011	57	297	floating	float	VERB
fuelectenerg-6011	57	298	gate	gate	NOUN
fuelectenerg-6011	57	299	/	/	SYM
fuelectenerg-6011	57	300	metal	metal	NOUN
fuelectenerg-6011	57	301	nanocrystals	nanocrystal	NOUN
fuelectenerg-6011	57	302	as	as	ADP
fuelectenerg-6011	57	303	the	the	DET
fuelectenerg-6011	57	304	charge	charge	NOUN
fuelectenerg-6011	57	305	storage	storage	NOUN
fuelectenerg-6011	57	306	layer	layer	NOUN
fuelectenerg-6011	57	307	159	159	NUM
fuelectenerg-6011	57	308	consumption	consumption	NOUN
fuelectenerg-6011	57	309	,	,	PUNCT
fuelectenerg-6011	57	310	and	and	CCONJ
fuelectenerg-6011	57	311	more	more	ADV
fuelectenerg-6011	57	312	powerful	powerful	ADJ
fuelectenerg-6011	57	313	endurance	endurance	NOUN
fuelectenerg-6011	57	314	characteristics	characteristic	NOUN
fuelectenerg-6011	57	315	compared	compare	VERB
fuelectenerg-6011	57	316	to	to	ADP
fuelectenerg-6011	57	317	conventional	conventional	ADJ
fuelectenerg-6011	57	318	continuous	continuous	ADJ
fuelectenerg-6011	57	319	floating	float	VERB
fuelectenerg-6011	57	320	-	-	PUNCT
fuelectenerg-6011	57	321	gate	gate	NOUN
fuelectenerg-6011	57	322	nonvolatile	nonvolatile	NOUN
fuelectenerg-6011	57	323	memory	memory	NOUN
fuelectenerg-6011	57	324	devices	device	NOUN
fuelectenerg-6011	57	325	.	.	PUNCT
fuelectenerg-6011	58	1	during	during	ADP
fuelectenerg-6011	58	2	the	the	DET
fuelectenerg-6011	58	3	last	last	ADJ
fuelectenerg-6011	58	4	few	few	ADJ
fuelectenerg-6011	58	5	years	year	NOUN
fuelectenerg-6011	58	6	,	,	PUNCT
fuelectenerg-6011	58	7	si	si	PROPN
fuelectenerg-6011	58	8	and	and	CCONJ
fuelectenerg-6011	58	9	ge	ge	PROPN
fuelectenerg-6011	58	10	nanocrystals	nanocrystal	NOUN
fuelectenerg-6011	58	11	embedded	embed	VERB
fuelectenerg-6011	58	12	in	in	ADP
fuelectenerg-6011	58	13	gate	gate	NOUN
fuelectenerg-6011	58	14	oxide	oxide	NOUN
fuelectenerg-6011	58	15	layers	layer	NOUN
fuelectenerg-6011	58	16	have	have	AUX
fuelectenerg-6011	58	17	been	be	AUX
fuelectenerg-6011	58	18	studied	study	VERB
fuelectenerg-6011	58	19	as	as	ADP
fuelectenerg-6011	58	20	the	the	DET
fuelectenerg-6011	58	21	charge	charge	NOUN
fuelectenerg-6011	58	22	storage	storage	NOUN
fuelectenerg-6011	58	23	nodes	node	NOUN
fuelectenerg-6011	58	24	in	in	ADP
fuelectenerg-6011	58	25	silicon	silicon	NOUN
fuelectenerg-6011	58	26	-	-	PUNCT
fuelectenerg-6011	58	27	based	base	VERB
fuelectenerg-6011	58	28	memory	memory	NOUN
fuelectenerg-6011	58	29	devices	device	NOUN
fuelectenerg-6011	58	30	.	.	PUNCT
fuelectenerg-6011	59	1	but	but	CCONJ
fuelectenerg-6011	59	2	it	it	PRON
fuelectenerg-6011	59	3	has	have	AUX
fuelectenerg-6011	59	4	been	be	AUX
fuelectenerg-6011	59	5	found	find	VERB
fuelectenerg-6011	59	6	that	that	SCONJ
fuelectenerg-6011	59	7	during	during	ADP
fuelectenerg-6011	59	8	the	the	DET
fuelectenerg-6011	59	9	device	device	NOUN
fuelectenerg-6011	59	10	fabrication	fabrication	NOUN
fuelectenerg-6011	59	11	their	their	PRON
fuelectenerg-6011	59	12	retention	retention	NOUN
fuelectenerg-6011	59	13	characteristics	characteristic	NOUN
fuelectenerg-6011	59	14	are	be	AUX
fuelectenerg-6011	59	15	very	very	ADV
fuelectenerg-6011	59	16	sensitive	sensitive	ADJ
fuelectenerg-6011	59	17	to	to	ADP
fuelectenerg-6011	59	18	the	the	DET
fuelectenerg-6011	59	19	thermal	thermal	ADJ
fuelectenerg-6011	59	20	process	process	NOUN
fuelectenerg-6011	59	21	because	because	SCONJ
fuelectenerg-6011	59	22	of	of	ADP
fuelectenerg-6011	59	23	the	the	DET
fuelectenerg-6011	59	24	existence	existence	NOUN
fuelectenerg-6011	59	25	of	of	ADP
fuelectenerg-6011	59	26	defects	defect	NOUN
fuelectenerg-6011	59	27	and	and	CCONJ
fuelectenerg-6011	59	28	traps	trap	NOUN
fuelectenerg-6011	59	29	inside	inside	ADV
fuelectenerg-6011	59	30	or	or	CCONJ
fuelectenerg-6011	59	31	at	at	ADP
fuelectenerg-6011	59	32	the	the	DET
fuelectenerg-6011	59	33	surface	surface	NOUN
fuelectenerg-6011	59	34	of	of	ADP
fuelectenerg-6011	59	35	the	the	DET
fuelectenerg-6011	59	36	nanocrystals	nanocrystal	NOUN
fuelectenerg-6011	59	37	.	.	PUNCT
fuelectenerg-6011	60	1	the	the	DET
fuelectenerg-6011	60	2	presence	presence	NOUN
fuelectenerg-6011	60	3	of	of	ADP
fuelectenerg-6011	60	4	these	these	DET
fuelectenerg-6011	60	5	defects	defect	NOUN
fuelectenerg-6011	60	6	and	and	CCONJ
fuelectenerg-6011	60	7	traps	trap	NOUN
fuelectenerg-6011	60	8	limits	limit	VERB
fuelectenerg-6011	60	9	the	the	DET
fuelectenerg-6011	60	10	application	application	NOUN
fuelectenerg-6011	60	11	of	of	ADP
fuelectenerg-6011	60	12	si	si	PROPN
fuelectenerg-6011	60	13	and	and	CCONJ
fuelectenerg-6011	60	14	ge	ge	PROPN
fuelectenerg-6011	60	15	nanocrystals	nanocrystal	NOUN
fuelectenerg-6011	60	16	in	in	ADP
fuelectenerg-6011	60	17	nonvolatile	nonvolatile	ADJ
fuelectenerg-6011	60	18	memory	memory	NOUN
fuelectenerg-6011	60	19	.	.	PUNCT
fuelectenerg-6011	61	1	thus	thus	ADV
fuelectenerg-6011	61	2	the	the	DET
fuelectenerg-6011	61	3	use	use	NOUN
fuelectenerg-6011	61	4	of	of	ADP
fuelectenerg-6011	61	5	metal	metal	NOUN
fuelectenerg-6011	61	6	nanoparticles	nanoparticle	NOUN
fuelectenerg-6011	61	7	has	have	AUX
fuelectenerg-6011	61	8	been	be	AUX
fuelectenerg-6011	61	9	proposed	propose	VERB
fuelectenerg-6011	61	10	to	to	PART
fuelectenerg-6011	61	11	prolong	prolong	VERB
fuelectenerg-6011	61	12	the	the	DET
fuelectenerg-6011	61	13	retention	retention	NOUN
fuelectenerg-6011	61	14	characteristics	characteristic	NOUN
fuelectenerg-6011	61	15	and	and	CCONJ
fuelectenerg-6011	61	16	to	to	PART
fuelectenerg-6011	61	17	overcome	overcome	VERB
fuelectenerg-6011	61	18	the	the	DET
fuelectenerg-6011	61	19	limits	limit	NOUN
fuelectenerg-6011	61	20	of	of	ADP
fuelectenerg-6011	61	21	semiconductor	semiconductor	NOUN
fuelectenerg-6011	61	22	nanocrystals	nanocrystal	NOUN
fuelectenerg-6011	61	23	[	[	X
fuelectenerg-6011	61	24	14	14	NUM
fuelectenerg-6011	61	25	]	]	PUNCT
fuelectenerg-6011	61	26	.	.	PUNCT
fuelectenerg-6011	62	1	the	the	DET
fuelectenerg-6011	62	2	fabrication	fabrication	NOUN
fuelectenerg-6011	62	3	of	of	ADP
fuelectenerg-6011	62	4	a	a	DET
fuelectenerg-6011	62	5	discrete	discrete	ADJ
fuelectenerg-6011	62	6	non	non	ADJ
fuelectenerg-6011	62	7	volatile	volatile	ADJ
fuelectenerg-6011	62	8	memory	memory	NOUN
fuelectenerg-6011	62	9	(	(	PUNCT
fuelectenerg-6011	62	10	nvm	nvm	NOUN
fuelectenerg-6011	62	11	)	)	PUNCT
fuelectenerg-6011	62	12	cell	cell	NOUN
fuelectenerg-6011	62	13	requires	require	VERB
fuelectenerg-6011	62	14	a	a	DET
fuelectenerg-6011	62	15	perfect	perfect	ADJ
fuelectenerg-6011	62	16	control	control	NOUN
fuelectenerg-6011	62	17	of	of	ADP
fuelectenerg-6011	62	18	four	four	NUM
fuelectenerg-6011	62	19	main	main	ADJ
fuelectenerg-6011	62	20	parameters	parameter	NOUN
fuelectenerg-6011	62	21	:	:	PUNCT
fuelectenerg-6011	62	22	(	(	PUNCT
fuelectenerg-6011	62	23	a	a	X
fuelectenerg-6011	62	24	)	)	PUNCT
fuelectenerg-6011	62	25	the	the	DET
fuelectenerg-6011	62	26	tunnel	tunnel	NOUN
fuelectenerg-6011	62	27	oxide	oxide	NOUN
fuelectenerg-6011	62	28	thickness	thickness	NOUN
fuelectenerg-6011	62	29	(	(	PUNCT
fuelectenerg-6011	62	30	b	b	X
fuelectenerg-6011	62	31	)	)	PUNCT
fuelectenerg-6011	62	32	the	the	DET
fuelectenerg-6011	62	33	nanocrystal	nanocrystal	ADJ
fuelectenerg-6011	62	34	density	density	NOUN
fuelectenerg-6011	62	35	(	(	PUNCT
fuelectenerg-6011	62	36	c	c	X
fuelectenerg-6011	62	37	)	)	PUNCT
fuelectenerg-6011	62	38	the	the	DET
fuelectenerg-6011	62	39	nanocrystal	nanocrystal	ADJ
fuelectenerg-6011	62	40	diameter	diameter	NOUN
fuelectenerg-6011	62	41	and	and	CCONJ
fuelectenerg-6011	62	42	(	(	PUNCT
fuelectenerg-6011	62	43	d	d	X
fuelectenerg-6011	62	44	)	)	PUNCT
fuelectenerg-6011	62	45	the	the	DET
fuelectenerg-6011	62	46	control	control	NOUN
fuelectenerg-6011	62	47	oxide	oxide	NOUN
fuelectenerg-6011	62	48	thickness	thickness	NOUN
fuelectenerg-6011	62	49	.	.	PUNCT
fuelectenerg-6011	63	1	the	the	DET
fuelectenerg-6011	63	2	most	most	ADV
fuelectenerg-6011	63	3	commonly	commonly	ADV
fuelectenerg-6011	63	4	used	use	VERB
fuelectenerg-6011	63	5	methods	method	NOUN
fuelectenerg-6011	63	6	to	to	PART
fuelectenerg-6011	63	7	fabricate	fabricate	VERB
fuelectenerg-6011	63	8	nanocrystals	nanocrystal	NOUN
fuelectenerg-6011	63	9	are	be	AUX
fuelectenerg-6011	63	10	self	self	NOUN
fuelectenerg-6011	63	11	-	-	PUNCT
fuelectenerg-6011	63	12	assembly	assembly	NOUN
fuelectenerg-6011	63	13	,	,	PUNCT
fuelectenerg-6011	63	14	precipitation	precipitation	NOUN
fuelectenerg-6011	63	15	and	and	CCONJ
fuelectenerg-6011	63	16	chemical	chemical	NOUN
fuelectenerg-6011	63	17	reaction	reaction	NOUN
fuelectenerg-6011	63	18	.	.	PUNCT
fuelectenerg-6011	64	1	in	in	ADP
fuelectenerg-6011	64	2	self	self	NOUN
fuelectenerg-6011	64	3	assembly	assembly	NOUN
fuelectenerg-6011	64	4	procedure	procedure	NOUN
fuelectenerg-6011	64	5	,	,	PUNCT
fuelectenerg-6011	64	6	a	a	DET
fuelectenerg-6011	64	7	trapping	trap	VERB
fuelectenerg-6011	64	8	layer	layer	NOUN
fuelectenerg-6011	64	9	of	of	ADP
fuelectenerg-6011	64	10	1	1	NUM
fuelectenerg-6011	64	11	–	–	SYM
fuelectenerg-6011	64	12	5	5	NUM
fuelectenerg-6011	64	13	nm	nm	NOUN
fuelectenerg-6011	64	14	is	be	AUX
fuelectenerg-6011	64	15	deposited	deposit	VERB
fuelectenerg-6011	64	16	and	and	CCONJ
fuelectenerg-6011	64	17	then	then	ADV
fuelectenerg-6011	64	18	the	the	DET
fuelectenerg-6011	64	19	film	film	NOUN
fuelectenerg-6011	64	20	is	be	AUX
fuelectenerg-6011	64	21	annealed	anneal	VERB
fuelectenerg-6011	64	22	at	at	ADP
fuelectenerg-6011	64	23	a	a	DET
fuelectenerg-6011	64	24	temperature	temperature	NOUN
fuelectenerg-6011	64	25	close	close	ADV
fuelectenerg-6011	64	26	to	to	ADP
fuelectenerg-6011	64	27	its	its	PRON
fuelectenerg-6011	64	28	eutectic	eutectic	ADJ
fuelectenerg-6011	64	29	temperature	temperature	NOUN
fuelectenerg-6011	64	30	in	in	ADP
fuelectenerg-6011	64	31	an	an	DET
fuelectenerg-6011	64	32	inert	inert	ADJ
fuelectenerg-6011	64	33	gas	gas	NOUN
fuelectenerg-6011	64	34	ambient	ambient	NOUN
fuelectenerg-6011	64	35	to	to	PART
fuelectenerg-6011	64	36	transform	transform	VERB
fuelectenerg-6011	64	37	the	the	DET
fuelectenerg-6011	64	38	trapping	trap	VERB
fuelectenerg-6011	64	39	layer	layer	NOUN
fuelectenerg-6011	64	40	into	into	ADP
fuelectenerg-6011	64	41	a	a	DET
fuelectenerg-6011	64	42	nanocrystal	nanocrystal	ADJ
fuelectenerg-6011	64	43	structure	structure	NOUN
fuelectenerg-6011	64	44	.	.	PUNCT
fuelectenerg-6011	65	1	the	the	DET
fuelectenerg-6011	65	2	diameter	diameter	NOUN
fuelectenerg-6011	65	3	of	of	ADP
fuelectenerg-6011	65	4	the	the	DET
fuelectenerg-6011	65	5	nanocrystal	nanocrystal	NOUN
fuelectenerg-6011	65	6	depends	depend	VERB
fuelectenerg-6011	65	7	on	on	ADP
fuelectenerg-6011	65	8	the	the	DET
fuelectenerg-6011	65	9	thickness	thickness	NOUN
fuelectenerg-6011	65	10	of	of	ADP
fuelectenerg-6011	65	11	the	the	DET
fuelectenerg-6011	65	12	trapping	trap	VERB
fuelectenerg-6011	65	13	layer	layer	NOUN
fuelectenerg-6011	65	14	as	as	ADV
fuelectenerg-6011	65	15	well	well	ADV
fuelectenerg-6011	65	16	as	as	ADP
fuelectenerg-6011	65	17	the	the	DET
fuelectenerg-6011	65	18	temperature	temperature	NOUN
fuelectenerg-6011	65	19	and	and	CCONJ
fuelectenerg-6011	65	20	duration	duration	NOUN
fuelectenerg-6011	65	21	of	of	ADP
fuelectenerg-6011	65	22	the	the	DET
fuelectenerg-6011	65	23	thermal	thermal	ADJ
fuelectenerg-6011	65	24	treatment	treatment	NOUN
fuelectenerg-6011	65	25	.	.	PUNCT
fuelectenerg-6011	66	1	however	however	ADV
fuelectenerg-6011	66	2	this	this	DET
fuelectenerg-6011	66	3	method	method	NOUN
fuelectenerg-6011	66	4	can	can	AUX
fuelectenerg-6011	66	5	not	not	PART
fuelectenerg-6011	66	6	make	make	VERB
fuelectenerg-6011	66	7	sure	sure	ADJ
fuelectenerg-6011	66	8	that	that	SCONJ
fuelectenerg-6011	66	9	the	the	DET
fuelectenerg-6011	66	10	trapping	trap	VERB
fuelectenerg-6011	66	11	layer	layer	NOUN
fuelectenerg-6011	66	12	is	be	AUX
fuelectenerg-6011	66	13	completely	completely	ADV
fuelectenerg-6011	66	14	discrete	discrete	ADJ
fuelectenerg-6011	66	15	.	.	PUNCT
fuelectenerg-6011	67	1	in	in	ADP
fuelectenerg-6011	67	2	precipitation	precipitation	NOUN
fuelectenerg-6011	67	3	method	method	NOUN
fuelectenerg-6011	67	4	,	,	PUNCT
fuelectenerg-6011	67	5	an	an	DET
fuelectenerg-6011	67	6	oversaturated	oversaturated	ADJ
fuelectenerg-6011	67	7	or	or	CCONJ
fuelectenerg-6011	67	8	mixed	mixed	ADJ
fuelectenerg-6011	67	9	trapping	trap	VERB
fuelectenerg-6011	67	10	layer	layer	NOUN
fuelectenerg-6011	67	11	is	be	AUX
fuelectenerg-6011	67	12	prepared	prepare	VERB
fuelectenerg-6011	67	13	by	by	ADP
fuelectenerg-6011	67	14	ion	ion	NOUN
fuelectenerg-6011	67	15	implantation	implantation	NOUN
fuelectenerg-6011	67	16	into	into	ADP
fuelectenerg-6011	67	17	a	a	DET
fuelectenerg-6011	67	18	deposited	deposit	VERB
fuelectenerg-6011	67	19	insulator	insulator	NOUN
fuelectenerg-6011	67	20	layer	layer	NOUN
fuelectenerg-6011	67	21	or	or	CCONJ
fuelectenerg-6011	67	22	codeposit	codeposit	NOUN
fuelectenerg-6011	67	23	system	system	NOUN
fuelectenerg-6011	67	24	to	to	PART
fuelectenerg-6011	67	25	form	form	VERB
fuelectenerg-6011	67	26	nanocrystals	nanocrystal	NOUN
fuelectenerg-6011	67	27	by	by	ADP
fuelectenerg-6011	67	28	further	further	ADJ
fuelectenerg-6011	67	29	thermal	thermal	ADJ
fuelectenerg-6011	67	30	annealing	annealing	NOUN
fuelectenerg-6011	67	31	.	.	PUNCT
fuelectenerg-6011	68	1	however	however	ADV
fuelectenerg-6011	68	2	,	,	PUNCT
fuelectenerg-6011	68	3	this	this	DET
fuelectenerg-6011	68	4	method	method	NOUN
fuelectenerg-6011	68	5	has	have	VERB
fuelectenerg-6011	68	6	also	also	ADV
fuelectenerg-6011	68	7	some	some	DET
fuelectenerg-6011	68	8	limitations	limitation	NOUN
fuelectenerg-6011	68	9	due	due	ADP
fuelectenerg-6011	68	10	to	to	ADP
fuelectenerg-6011	68	11	use	use	NOUN
fuelectenerg-6011	68	12	of	of	ADP
fuelectenerg-6011	68	13	high	high	ADJ
fuelectenerg-6011	68	14	energy	energy	NOUN
fuelectenerg-6011	68	15	ion	ion	NOUN
fuelectenerg-6011	68	16	implantation	implantation	NOUN
fuelectenerg-6011	68	17	for	for	ADP
fuelectenerg-6011	68	18	formation	formation	NOUN
fuelectenerg-6011	68	19	of	of	ADP
fuelectenerg-6011	68	20	nanocrystals	nanocrystal	NOUN
fuelectenerg-6011	68	21	.	.	PUNCT
fuelectenerg-6011	69	1	the	the	DET
fuelectenerg-6011	69	2	chemical	chemical	NOUN
fuelectenerg-6011	69	3	reaction	reaction	NOUN
fuelectenerg-6011	69	4	method	method	NOUN
fuelectenerg-6011	69	5	is	be	AUX
fuelectenerg-6011	69	6	most	most	ADV
fuelectenerg-6011	69	7	widely	widely	ADV
fuelectenerg-6011	69	8	used	use	VERB
fuelectenerg-6011	69	9	to	to	PART
fuelectenerg-6011	69	10	form	form	VERB
fuelectenerg-6011	69	11	a	a	DET
fuelectenerg-6011	69	12	nanocrystal	nanocrystal	ADJ
fuelectenerg-6011	69	13	trapping	trap	VERB
fuelectenerg-6011	69	14	layer	layer	NOUN
fuelectenerg-6011	69	15	.	.	PUNCT
fuelectenerg-6011	70	1	initially	initially	ADV
fuelectenerg-6011	70	2	,	,	PUNCT
fuelectenerg-6011	70	3	a	a	DET
fuelectenerg-6011	70	4	binary	binary	ADJ
fuelectenerg-6011	70	5	or	or	CCONJ
fuelectenerg-6011	70	6	tertiary	tertiary	ADJ
fuelectenerg-6011	70	7	mixed	mixed	ADJ
fuelectenerg-6011	70	8	layer	layer	NOUN
fuelectenerg-6011	70	9	is	be	AUX
fuelectenerg-6011	70	10	co	co	VERB
fuelectenerg-6011	70	11	-	-	VERB
fuelectenerg-6011	70	12	deposited	deposit	VERB
fuelectenerg-6011	70	13	by	by	ADP
fuelectenerg-6011	70	14	different	different	ADJ
fuelectenerg-6011	70	15	material	material	NOUN
fuelectenerg-6011	70	16	systems	system	NOUN
fuelectenerg-6011	70	17	and	and	CCONJ
fuelectenerg-6011	70	18	then	then	ADV
fuelectenerg-6011	70	19	the	the	DET
fuelectenerg-6011	70	20	layer	layer	NOUN
fuelectenerg-6011	70	21	is	be	AUX
fuelectenerg-6011	70	22	oxidized	oxidize	VERB
fuelectenerg-6011	70	23	by	by	ADP
fuelectenerg-6011	70	24	rta	rta	PROPN
fuelectenerg-6011	70	25	under	under	ADP
fuelectenerg-6011	70	26	an	an	DET
fuelectenerg-6011	70	27	oxygen	oxygen	NOUN
fuelectenerg-6011	70	28	flow	flow	NOUN
fuelectenerg-6011	70	29	.	.	PUNCT
fuelectenerg-6011	71	1	but	but	CCONJ
fuelectenerg-6011	71	2	the	the	DET
fuelectenerg-6011	71	3	control	control	NOUN
fuelectenerg-6011	71	4	of	of	ADP
fuelectenerg-6011	71	5	the	the	DET
fuelectenerg-6011	71	6	oxygen	oxygen	NOUN
fuelectenerg-6011	71	7	concentration	concentration	NOUN
fuelectenerg-6011	71	8	in	in	ADP
fuelectenerg-6011	71	9	the	the	DET
fuelectenerg-6011	71	10	mixed	mixed	ADJ
fuelectenerg-6011	71	11	layer	layer	NOUN
fuelectenerg-6011	71	12	is	be	AUX
fuelectenerg-6011	71	13	an	an	DET
fuelectenerg-6011	71	14	important	important	ADJ
fuelectenerg-6011	71	15	issue	issue	NOUN
fuelectenerg-6011	71	16	.	.	PUNCT
fuelectenerg-6011	72	1	a	a	DET
fuelectenerg-6011	72	2	low	low	ADJ
fuelectenerg-6011	72	3	oxygen	oxygen	NOUN
fuelectenerg-6011	72	4	concentration	concentration	NOUN
fuelectenerg-6011	72	5	causes	cause	VERB
fuelectenerg-6011	72	6	insufficient	insufficient	ADJ
fuelectenerg-6011	72	7	oxidation	oxidation	NOUN
fuelectenerg-6011	72	8	of	of	ADP
fuelectenerg-6011	72	9	the	the	DET
fuelectenerg-6011	72	10	mixed	mixed	ADJ
fuelectenerg-6011	72	11	layer	layer	NOUN
fuelectenerg-6011	72	12	and	and	CCONJ
fuelectenerg-6011	72	13	higher	high	ADJ
fuelectenerg-6011	72	14	leakage	leakage	NOUN
fuelectenerg-6011	72	15	current	current	ADJ
fuelectenerg-6011	72	16	and	and	CCONJ
fuelectenerg-6011	72	17	a	a	DET
fuelectenerg-6011	72	18	high	high	ADJ
fuelectenerg-6011	72	19	oxygen	oxygen	NOUN
fuelectenerg-6011	72	20	concentration	concentration	NOUN
fuelectenerg-6011	72	21	can	can	AUX
fuelectenerg-6011	72	22	result	result	VERB
fuelectenerg-6011	72	23	in	in	ADP
fuelectenerg-6011	72	24	the	the	DET
fuelectenerg-6011	72	25	oxidation	oxidation	NOUN
fuelectenerg-6011	72	26	of	of	ADP
fuelectenerg-6011	72	27	the	the	DET
fuelectenerg-6011	72	28	nanocrystal	nanocrystal	NOUN
fuelectenerg-6011	72	29	.	.	PUNCT
fuelectenerg-6011	73	1	the	the	DET
fuelectenerg-6011	73	2	memory	memory	NOUN
fuelectenerg-6011	73	3	property	property	NOUN
fuelectenerg-6011	73	4	can	can	AUX
fuelectenerg-6011	73	5	be	be	AUX
fuelectenerg-6011	73	6	lost	lose	VERB
fuelectenerg-6011	73	7	if	if	SCONJ
fuelectenerg-6011	73	8	either	either	PRON
fuelectenerg-6011	73	9	of	of	ADP
fuelectenerg-6011	73	10	these	these	DET
fuelectenerg-6011	73	11	two	two	NUM
fuelectenerg-6011	73	12	conditions	condition	NOUN
fuelectenerg-6011	73	13	occur	occur	VERB
fuelectenerg-6011	73	14	.	.	PUNCT
fuelectenerg-6011	74	1	a	a	DET
fuelectenerg-6011	74	2	metallic	metallic	ADJ
fuelectenerg-6011	74	3	nanocrystal	nanocrystal	ADJ
fuelectenerg-6011	74	4	storage	storage	NOUN
fuelectenerg-6011	74	5	layer	layer	NOUN
fuelectenerg-6011	74	6	has	have	VERB
fuelectenerg-6011	74	7	several	several	ADJ
fuelectenerg-6011	74	8	advantages	advantage	NOUN
fuelectenerg-6011	74	9	over	over	ADP
fuelectenerg-6011	74	10	the	the	DET
fuelectenerg-6011	74	11	semiconductor	semiconductor	NOUN
fuelectenerg-6011	74	12	nanocrystal	nanocrystal	ADJ
fuelectenerg-6011	74	13	storage	storage	NOUN
fuelectenerg-6011	74	14	layer	layer	NOUN
fuelectenerg-6011	74	15	due	due	ADP
fuelectenerg-6011	74	16	to	to	ADP
fuelectenerg-6011	74	17	their	their	PRON
fuelectenerg-6011	74	18	high	high	ADJ
fuelectenerg-6011	74	19	density	density	NOUN
fuelectenerg-6011	74	20	of	of	ADP
fuelectenerg-6011	74	21	states	state	NOUN
fuelectenerg-6011	74	22	and	and	CCONJ
fuelectenerg-6011	74	23	work	work	NOUN
fuelectenerg-6011	74	24	function	function	NOUN
fuelectenerg-6011	74	25	engineering	engineering	NOUN
fuelectenerg-6011	74	26	.	.	PUNCT
fuelectenerg-6011	75	1	the	the	DET
fuelectenerg-6011	75	2	large	large	ADJ
fuelectenerg-6011	75	3	work	work	NOUN
fuelectenerg-6011	75	4	function	function	NOUN
fuelectenerg-6011	75	5	difference	difference	NOUN
fuelectenerg-6011	75	6	between	between	ADP
fuelectenerg-6011	75	7	the	the	DET
fuelectenerg-6011	75	8	metal	metal	NOUN
fuelectenerg-6011	75	9	and	and	CCONJ
fuelectenerg-6011	75	10	the	the	DET
fuelectenerg-6011	75	11	si	si	NOUN
fuelectenerg-6011	75	12	substrate	substrate	NOUN
fuelectenerg-6011	75	13	creates	create	VERB
fuelectenerg-6011	75	14	a	a	DET
fuelectenerg-6011	75	15	deep	deep	ADJ
fuelectenerg-6011	75	16	potential	potential	NOUN
fuelectenerg-6011	75	17	well	well	INTJ
fuelectenerg-6011	75	18	that	that	PRON
fuelectenerg-6011	75	19	ensures	ensure	VERB
fuelectenerg-6011	75	20	a	a	DET
fuelectenerg-6011	75	21	lesser	less	ADJ
fuelectenerg-6011	75	22	charge	charge	NOUN
fuelectenerg-6011	75	23	loss	loss	NOUN
fuelectenerg-6011	75	24	ultimately	ultimately	ADV
fuelectenerg-6011	75	25	resulting	result	VERB
fuelectenerg-6011	75	26	in	in	ADP
fuelectenerg-6011	75	27	enhancement	enhancement	NOUN
fuelectenerg-6011	75	28	of	of	ADP
fuelectenerg-6011	75	29	the	the	DET
fuelectenerg-6011	75	30	retention	retention	NOUN
fuelectenerg-6011	75	31	characteristics	characteristic	NOUN
fuelectenerg-6011	75	32	.	.	PUNCT
fuelectenerg-6011	76	1	blocking	block	VERB
fuelectenerg-6011	76	2	layers	layer	NOUN
fuelectenerg-6011	76	3	comprised	comprise	VERB
fuelectenerg-6011	76	4	of	of	ADP
fuelectenerg-6011	76	5	high	high	ADJ
fuelectenerg-6011	76	6	-	-	PUNCT
fuelectenerg-6011	76	7	k	k	NOUN
fuelectenerg-6011	76	8	dielectrics	dielectric	NOUN
fuelectenerg-6011	76	9	allow	allow	VERB
fuelectenerg-6011	76	10	the	the	DET
fuelectenerg-6011	76	11	use	use	NOUN
fuelectenerg-6011	76	12	of	of	ADP
fuelectenerg-6011	76	13	relatively	relatively	ADV
fuelectenerg-6011	76	14	thick	thick	ADJ
fuelectenerg-6011	76	15	films	film	NOUN
fuelectenerg-6011	76	16	which	which	PRON
fuelectenerg-6011	76	17	prevent	prevent	VERB
fuelectenerg-6011	76	18	leakages	leakage	NOUN
fuelectenerg-6011	76	19	while	while	SCONJ
fuelectenerg-6011	76	20	maintaining	maintain	VERB
fuelectenerg-6011	76	21	a	a	DET
fuelectenerg-6011	76	22	thin	thin	ADJ
fuelectenerg-6011	76	23	equivalent	equivalent	ADJ
fuelectenerg-6011	76	24	oxide	oxide	NOUN
fuelectenerg-6011	76	25	thickness	thickness	NOUN
fuelectenerg-6011	76	26	(	(	PUNCT
fuelectenerg-6011	76	27	eot	eot	NOUN
fuelectenerg-6011	76	28	)	)	PUNCT
fuelectenerg-6011	76	29	and	and	CCONJ
fuelectenerg-6011	76	30	prevent	prevent	VERB
fuelectenerg-6011	76	31	any	any	DET
fuelectenerg-6011	76	32	charge	charge	NOUN
fuelectenerg-6011	76	33	leakage	leakage	NOUN
fuelectenerg-6011	76	34	to	to	ADP
fuelectenerg-6011	76	35	the	the	DET
fuelectenerg-6011	76	36	top	top	ADJ
fuelectenerg-6011	76	37	gate	gate	NOUN
fuelectenerg-6011	76	38	.	.	PUNCT
fuelectenerg-6011	77	1	moreover	moreover	ADV
fuelectenerg-6011	77	2	,	,	PUNCT
fuelectenerg-6011	77	3	the	the	DET
fuelectenerg-6011	77	4	increased	increase	VERB
fuelectenerg-6011	77	5	capacitance	capacitance	NOUN
fuelectenerg-6011	77	6	density	density	NOUN
fuelectenerg-6011	77	7	offered	offer	VERB
fuelectenerg-6011	77	8	by	by	ADP
fuelectenerg-6011	77	9	high	high	ADJ
fuelectenerg-6011	77	10	-	-	PUNCT
fuelectenerg-6011	77	11	k	k	PROPN
fuelectenerg-6011	77	12	films	film	NOUN
fuelectenerg-6011	77	13	enlarges	enlarge	VERB
fuelectenerg-6011	77	14	the	the	DET
fuelectenerg-6011	77	15	charge	charge	NOUN
fuelectenerg-6011	77	16	storage	storage	NOUN
fuelectenerg-6011	77	17	density	density	NOUN
fuelectenerg-6011	77	18	.	.	PUNCT
fuelectenerg-6011	78	1	fig	fig	NOUN
fuelectenerg-6011	78	2	.	.	PUNCT
fuelectenerg-6011	79	1	3	3	NUM
fuelectenerg-6011	79	2	shows	show	VERB
fuelectenerg-6011	79	3	the	the	DET
fuelectenerg-6011	79	4	schematic	schematic	ADJ
fuelectenerg-6011	79	5	diagram	diagram	NOUN
fuelectenerg-6011	79	6	enlightening	enlighten	VERB
fuelectenerg-6011	79	7	the	the	DET
fuelectenerg-6011	79	8	motivation	motivation	NOUN
fuelectenerg-6011	79	9	and	and	CCONJ
fuelectenerg-6011	79	10	challenges	challenge	NOUN
fuelectenerg-6011	79	11	in	in	ADP
fuelectenerg-6011	79	12	transitioning	transition	VERB
fuelectenerg-6011	79	13	from	from	ADP
fuelectenerg-6011	79	14	conventional	conventional	ADJ
fuelectenerg-6011	79	15	memory	memory	NOUN
fuelectenerg-6011	79	16	structure	structure	NOUN
fuelectenerg-6011	79	17	to	to	ADP
fuelectenerg-6011	79	18	a	a	DET
fuelectenerg-6011	79	19	novel	novel	ADJ
fuelectenerg-6011	79	20	high	high	ADJ
fuelectenerg-6011	79	21	-	-	PUNCT
fuelectenerg-6011	79	22	k	k	NOUN
fuelectenerg-6011	79	23	mos	mos	PROPN
fuelectenerg-6011	79	24	memory	memory	NOUN
fuelectenerg-6011	79	25	structure	structure	NOUN
fuelectenerg-6011	79	26	.	.	PUNCT
fuelectenerg-6011	80	1	160	160	NUM
fuelectenerg-6011	80	2	r.	r.	PROPN
fuelectenerg-6011	80	3	rajput	rajput	PROPN
fuelectenerg-6011	80	4	,	,	PUNCT
fuelectenerg-6011	80	5	r.	r.	PROPN
fuelectenerg-6011	80	6	vaid	vaid	PROPN
fuelectenerg-6011	80	7	si	si	PROPN
fuelectenerg-6011	80	8	substrate	substrate	NOUN
fuelectenerg-6011	80	9	sio2	sio2	NOUN
fuelectenerg-6011	80	10	tunneling	tunneling	NOUN
fuelectenerg-6011	80	11	oxide	oxide	NOUN
fuelectenerg-6011	80	12	poly	poly	ADJ
fuelectenerg-6011	80	13	-	-	PUNCT
fuelectenerg-6011	80	14	si	si	NOUN
fuelectenerg-6011	80	15	floating	float	VERB
fuelectenerg-6011	80	16	gate	gate	NOUN
fuelectenerg-6011	80	17	poly	poly	ADJ
fuelectenerg-6011	80	18	-	-	PUNCT
fuelectenerg-6011	80	19	si	si	PROPN
fuelectenerg-6011	80	20	control	control	PROPN
fuelectenerg-6011	80	21	gate	gate	PROPN
fuelectenerg-6011	80	22	oxide	oxide	NOUN
fuelectenerg-6011	80	23	-	-	PUNCT
fuelectenerg-6011	80	24	nitride	nitride	NOUN
fuelectenerg-6011	80	25	-	-	PUNCT
fuelectenerg-6011	80	26	oxide	oxide	NOUN
fuelectenerg-6011	80	27	blocking	blocking	NOUN
fuelectenerg-6011	80	28	oxide	oxide	NOUN
fuelectenerg-6011	80	29	(	(	PUNCT
fuelectenerg-6011	80	30	ipd	ipd	PROPN
fuelectenerg-6011	80	31	)	)	PUNCT
fuelectenerg-6011	80	32	si	si	NOUN
fuelectenerg-6011	80	33	substrate	substrate	NOUN
fuelectenerg-6011	80	34	high	high	ADJ
fuelectenerg-6011	80	35	-	-	PUNCT
fuelectenerg-6011	80	36	k	k	NOUN
fuelectenerg-6011	80	37	tunneling	tunneling	NOUN
fuelectenerg-6011	80	38	oxide	oxide	NOUN
fuelectenerg-6011	80	39	metal	metal	NOUN
fuelectenerg-6011	80	40	/metal	/metal	INTJ
fuelectenerg-6011	80	41	nanocrystal	nanocrystal	ADJ
fuelectenerg-6011	80	42	floating	float	VERB
fuelectenerg-6011	80	43	gate	gate	NOUN
fuelectenerg-6011	80	44	metal	metal	PROPN
fuelectenerg-6011	80	45	control	control	PROPN
fuelectenerg-6011	80	46	gate	gate	PROPN
fuelectenerg-6011	80	47	high	high	ADJ
fuelectenerg-6011	80	48	-	-	PUNCT
fuelectenerg-6011	80	49	k	k	NOUN
fuelectenerg-6011	80	50	blocking	block	VERB
fuelectenerg-6011	80	51	oxide	oxide	NOUN
fuelectenerg-6011	80	52	(	(	PUNCT
fuelectenerg-6011	80	53	ipd	ipd	PROPN
fuelectenerg-6011	80	54	)	)	PUNCT
fuelectenerg-6011	80	55	introduces	introduce	VERB
fuelectenerg-6011	80	56	poly	poly	ADJ
fuelectenerg-6011	80	57	gate	gate	NOUN
fuelectenerg-6011	80	58	depletion	depletion	NOUN
fuelectenerg-6011	80	59	effect	effect	NOUN
fuelectenerg-6011	80	60	,	,	PUNCT
fuelectenerg-6011	80	61	increases	increase	VERB
fuelectenerg-6011	80	62	boron	boron	NOUN
fuelectenerg-6011	80	63	penetration	penetration	NOUN
fuelectenerg-6011	80	64	,	,	PUNCT
fuelectenerg-6011	80	65	threshold	threshold	NOUN
fuelectenerg-6011	80	66	voltage	voltage	NOUN
fuelectenerg-6011	80	67	fluctuation	fluctuation	NOUN
fuelectenerg-6011	80	68	and	and	CCONJ
fuelectenerg-6011	80	69	degrades	degrade	VERB
fuelectenerg-6011	80	70	drive	drive	VERB
fuelectenerg-6011	80	71	current	current	ADJ
fuelectenerg-6011	80	72	.	.	PUNCT
fuelectenerg-6011	81	1	free	free	ADJ
fuelectenerg-6011	81	2	from	from	ADP
fuelectenerg-6011	81	3	poly	poly	ADJ
fuelectenerg-6011	81	4	depletion	depletion	NOUN
fuelectenerg-6011	81	5	effect	effect	NOUN
fuelectenerg-6011	81	6	.	.	PUNCT
fuelectenerg-6011	82	1	work	work	NOUN
fuelectenerg-6011	82	2	function	function	NOUN
fuelectenerg-6011	82	3	tunability	tunability	NOUN
fuelectenerg-6011	82	4	and	and	CCONJ
fuelectenerg-6011	82	5	reduces	reduce	VERB
fuelectenerg-6011	82	6	unwanted	unwanted	ADJ
fuelectenerg-6011	82	7	control	control	NOUN
fuelectenerg-6011	82	8	gate	gate	NOUN
fuelectenerg-6011	82	9	–	–	PUNCT
fuelectenerg-6011	82	10	floating	float	VERB
fuelectenerg-6011	82	11	gate	gate	NOUN
fuelectenerg-6011	82	12	leakage	leakage	NOUN
fuelectenerg-6011	82	13	reduced	reduce	VERB
fuelectenerg-6011	82	14	leakage	leakage	NOUN
fuelectenerg-6011	82	15	compromising	compromise	VERB
fuelectenerg-6011	82	16	gcr	gcr	NOUN
fuelectenerg-6011	82	17	and	and	CCONJ
fuelectenerg-6011	82	18	lower	low	ADJ
fuelectenerg-6011	82	19	program	program	NOUN
fuelectenerg-6011	82	20	/	/	SYM
fuelectenerg-6011	82	21	erase	erase	NOUN
fuelectenerg-6011	82	22	speed	speed	NOUN
fuelectenerg-6011	82	23	improved	improve	VERB
fuelectenerg-6011	82	24	gcr	gcr	NOUN
fuelectenerg-6011	82	25	,	,	PUNCT
fuelectenerg-6011	82	26	enhanced	enhance	VERB
fuelectenerg-6011	82	27	program/	program/	NUM
fuelectenerg-6011	82	28	erased	erase	VERB
fuelectenerg-6011	82	29	speed	speed	NOUN
fuelectenerg-6011	82	30	without	without	ADP
fuelectenerg-6011	82	31	compromising	compromise	VERB
fuelectenerg-6011	82	32	leakage	leakage	NOUN
fuelectenerg-6011	82	33	current	current	ADJ
fuelectenerg-6011	82	34	higher	high	ADJ
fuelectenerg-6011	82	35	ballistic	ballistic	ADJ
fuelectenerg-6011	82	36	current	current	NOUN
fuelectenerg-6011	82	37	on	on	ADP
fuelectenerg-6011	82	38	reducing	reduce	VERB
fuelectenerg-6011	82	39	floating	float	VERB
fuelectenerg-6011	82	40	gate	gate	NOUN
fuelectenerg-6011	82	41	thickness	thickness	NOUN
fuelectenerg-6011	82	42	and	and	CCONJ
fuelectenerg-6011	82	43	degrades	degrade	VERB
fuelectenerg-6011	82	44	memory	memory	NOUN
fuelectenerg-6011	82	45	characteristics	characteristic	NOUN
fuelectenerg-6011	82	46	lower	low	ADJ
fuelectenerg-6011	82	47	ballistic	ballistic	ADJ
fuelectenerg-6011	82	48	current	current	ADJ
fuelectenerg-6011	82	49	and	and	CCONJ
fuelectenerg-6011	82	50	improved	improved	ADJ
fuelectenerg-6011	82	51	memory	memory	NOUN
fuelectenerg-6011	82	52	characteristics	characteristic	NOUN
fuelectenerg-6011	82	53	increased	increase	VERB
fuelectenerg-6011	82	54	leakage	leakage	NOUN
fuelectenerg-6011	82	55	current	current	NOUN
fuelectenerg-6011	82	56	on	on	ADP
fuelectenerg-6011	82	57	reducing	reduce	VERB
fuelectenerg-6011	82	58	thickness	thickness	NOUN
fuelectenerg-6011	82	59	and	and	CCONJ
fuelectenerg-6011	82	60	degrades	degrade	VERB
fuelectenerg-6011	82	61	charge	charge	NOUN
fuelectenerg-6011	82	62	retention	retention	NOUN
fuelectenerg-6011	82	63	characteristics	characteristic	NOUN
fuelectenerg-6011	82	64	reduced	reduce	VERB
fuelectenerg-6011	82	65	leakage	leakage	NOUN
fuelectenerg-6011	82	66	current	current	NOUN
fuelectenerg-6011	82	67	maintaining	maintain	VERB
fuelectenerg-6011	82	68	high	high	ADJ
fuelectenerg-6011	82	69	capacitance	capacitance	NOUN
fuelectenerg-6011	82	70	value	value	NOUN
fuelectenerg-6011	82	71	and	and	CCONJ
fuelectenerg-6011	82	72	improved	improve	VERB
fuelectenerg-6011	82	73	charge	charge	NOUN
fuelectenerg-6011	82	74	retention	retention	NOUN
fuelectenerg-6011	82	75	characteristics	characteristic	NOUN
fuelectenerg-6011	82	76	fig	fig	NOUN
fuelectenerg-6011	82	77	.	.	PUNCT
fuelectenerg-6011	83	1	3	3	NUM
fuelectenerg-6011	83	2	schematic	schematic	ADJ
fuelectenerg-6011	83	3	diagram	diagram	NOUN
fuelectenerg-6011	83	4	showing	show	VERB
fuelectenerg-6011	83	5	the	the	DET
fuelectenerg-6011	83	6	comparison	comparison	NOUN
fuelectenerg-6011	83	7	between	between	ADP
fuelectenerg-6011	83	8	conventional	conventional	ADJ
fuelectenerg-6011	83	9	and	and	CCONJ
fuelectenerg-6011	83	10	novel	novel	ADJ
fuelectenerg-6011	83	11	high	high	ADJ
fuelectenerg-6011	83	12	-	-	PUNCT
fuelectenerg-6011	83	13	k	k	NOUN
fuelectenerg-6011	83	14	mos	mos	PROPN
fuelectenerg-6011	83	15	memory	memory	NOUN
fuelectenerg-6011	83	16	structure	structure	NOUN
fuelectenerg-6011	83	17	2	2	NUM
fuelectenerg-6011	83	18	.	.	PUNCT
fuelectenerg-6011	83	19	related	relate	VERB
fuelectenerg-6011	83	20	work	work	NOUN
fuelectenerg-6011	83	21	to	to	ADP
fuelectenerg-6011	83	22	non	non	ADJ
fuelectenerg-6011	83	23	-	-	ADJ
fuelectenerg-6011	83	24	volatile	volatile	ADJ
fuelectenerg-6011	83	25	memory	memory	NOUN
fuelectenerg-6011	83	26	structures	structure	NOUN
fuelectenerg-6011	83	27	using	use	VERB
fuelectenerg-6011	83	28	different	different	ADJ
fuelectenerg-6011	83	29	metal	metal	NOUN
fuelectenerg-6011	83	30	nanocrystals	nanocrystal	NOUN
fuelectenerg-6011	83	31	/	/	SYM
fuelectenerg-6011	83	32	metal	metal	NOUN
fuelectenerg-6011	83	33	floating	float	VERB
fuelectenerg-6011	83	34	gate	gate	NOUN
fuelectenerg-6011	83	35	self	self	NOUN
fuelectenerg-6011	83	36	-	-	PUNCT
fuelectenerg-6011	83	37	assembly	assembly	NOUN
fuelectenerg-6011	83	38	of	of	ADP
fuelectenerg-6011	83	39	metal	metal	NOUN
fuelectenerg-6011	83	40	nanocrystals	nanocrystal	NOUN
fuelectenerg-6011	83	41	including	include	VERB
fuelectenerg-6011	83	42	au	au	PROPN
fuelectenerg-6011	83	43	,	,	PUNCT
fuelectenerg-6011	83	44	ag	ag	PROPN
fuelectenerg-6011	83	45	,	,	PUNCT
fuelectenerg-6011	83	46	and	and	CCONJ
fuelectenerg-6011	83	47	pt	pt	X
fuelectenerg-6011	83	48	on	on	ADP
fuelectenerg-6011	83	49	ultrathin	ultrathin	ADJ
fuelectenerg-6011	83	50	oxide	oxide	NOUN
fuelectenerg-6011	83	51	for	for	ADP
fuelectenerg-6011	83	52	nonvolatile	nonvolatile	NOUN
fuelectenerg-6011	83	53	memory	memory	NOUN
fuelectenerg-6011	83	54	applications	application	NOUN
fuelectenerg-6011	83	55	were	be	AUX
fuelectenerg-6011	83	56	investigated	investigate	VERB
fuelectenerg-6011	83	57	[	[	X
fuelectenerg-6011	83	58	15	15	NUM
fuelectenerg-6011	83	59	]	]	PUNCT
fuelectenerg-6011	83	60	and	and	CCONJ
fuelectenerg-6011	83	61	it	it	PRON
fuelectenerg-6011	83	62	was	be	AUX
fuelectenerg-6011	83	63	observed	observe	VERB
fuelectenerg-6011	83	64	that	that	SCONJ
fuelectenerg-6011	83	65	for	for	ADP
fuelectenerg-6011	83	66	non	non	X
fuelectenerg-6011	83	67	volatile	volatile	ADJ
fuelectenerg-6011	83	68	memory	memory	NOUN
fuelectenerg-6011	83	69	cells	cell	NOUN
fuelectenerg-6011	83	70	spherical	spherical	ADJ
fuelectenerg-6011	83	71	nanocrystals	nanocrystal	NOUN
fuelectenerg-6011	83	72	are	be	AUX
fuelectenerg-6011	83	73	preferred	prefer	VERB
fuelectenerg-6011	83	74	because	because	SCONJ
fuelectenerg-6011	83	75	the	the	DET
fuelectenerg-6011	83	76	three	three	NUM
fuelectenerg-6011	83	77	dimensional	dimensional	ADJ
fuelectenerg-6011	83	78	symmetry	symmetry	NOUN
fuelectenerg-6011	83	79	results	result	NOUN
fuelectenerg-6011	83	80	in	in	ADP
fuelectenerg-6011	83	81	the	the	DET
fuelectenerg-6011	83	82	best	good	ADJ
fuelectenerg-6011	83	83	charge	charge	NOUN
fuelectenerg-6011	83	84	confinement	confinement	NOUN
fuelectenerg-6011	83	85	and	and	CCONJ
fuelectenerg-6011	83	86	physical	physical	ADJ
fuelectenerg-6011	83	87	stability	stability	NOUN
fuelectenerg-6011	83	88	from	from	ADP
fuelectenerg-6011	83	89	surface	surface	NOUN
fuelectenerg-6011	83	90	energy	energy	NOUN
fuelectenerg-6011	83	91	minimization	minimization	NOUN
fuelectenerg-6011	83	92	.	.	PUNCT
fuelectenerg-6011	84	1	the	the	DET
fuelectenerg-6011	84	2	shallow	shallow	ADJ
fuelectenerg-6011	84	3	potential	potential	NOUN
fuelectenerg-6011	84	4	well	well	ADV
fuelectenerg-6011	84	5	in	in	ADP
fuelectenerg-6011	84	6	case	case	NOUN
fuelectenerg-6011	84	7	of	of	ADP
fuelectenerg-6011	84	8	semiconductor	semiconductor	NOUN
fuelectenerg-6011	84	9	nanocrystals	nanocrystal	NOUN
fuelectenerg-6011	84	10	(	(	PUNCT
fuelectenerg-6011	84	11	si	si	X
fuelectenerg-6011	84	12	nanocrystals	nanocrystal	NOUN
fuelectenerg-6011	84	13	paired	pair	VERB
fuelectenerg-6011	84	14	with	with	ADP
fuelectenerg-6011	84	15	a	a	DET
fuelectenerg-6011	84	16	si	si	NOUN
fuelectenerg-6011	84	17	substrate	substrate	NOUN
fuelectenerg-6011	84	18	)	)	PUNCT
fuelectenerg-6011	84	19	can	can	AUX
fuelectenerg-6011	84	20	only	only	ADV
fuelectenerg-6011	84	21	hold	hold	VERB
fuelectenerg-6011	84	22	charges	charge	NOUN
fuelectenerg-6011	84	23	for	for	ADP
fuelectenerg-6011	84	24	a	a	DET
fuelectenerg-6011	84	25	relatively	relatively	ADV
fuelectenerg-6011	84	26	short	short	ADJ
fuelectenerg-6011	84	27	time	time	NOUN
fuelectenerg-6011	84	28	because	because	SCONJ
fuelectenerg-6011	84	29	of	of	ADP
fuelectenerg-6011	84	30	direct	direct	ADJ
fuelectenerg-6011	84	31	-	-	PUNCT
fuelectenerg-6011	84	32	tunneling	tunneling	NOUN
fuelectenerg-6011	84	33	back	back	ADV
fuelectenerg-6011	84	34	to	to	ADP
fuelectenerg-6011	84	35	the	the	DET
fuelectenerg-6011	84	36	substrate	substrate	NOUN
fuelectenerg-6011	84	37	[	[	X
fuelectenerg-6011	84	38	16	16	NUM
fuelectenerg-6011	84	39	]	]	PUNCT
fuelectenerg-6011	84	40	.	.	PUNCT
fuelectenerg-6011	85	1	however	however	ADV
fuelectenerg-6011	85	2	,	,	PUNCT
fuelectenerg-6011	85	3	metal	metal	NOUN
fuelectenerg-6011	85	4	nanocrystals	nanocrystal	NOUN
fuelectenerg-6011	85	5	due	due	ADJ
fuelectenerg-6011	85	6	to	to	ADP
fuelectenerg-6011	85	7	their	their	PRON
fuelectenerg-6011	85	8	large	large	ADJ
fuelectenerg-6011	85	9	work	work	NOUN
fuelectenerg-6011	85	10	functions	function	NOUN
fuelectenerg-6011	85	11	can	can	AUX
fuelectenerg-6011	85	12	make	make	VERB
fuelectenerg-6011	85	13	use	use	NOUN
fuelectenerg-6011	85	14	of	of	ADP
fuelectenerg-6011	85	15	the	the	DET
fuelectenerg-6011	85	16	deep	deep	ADJ
fuelectenerg-6011	85	17	potential	potential	ADJ
fuelectenerg-6011	85	18	wells	well	NOUN
fuelectenerg-6011	85	19	to	to	PART
fuelectenerg-6011	85	20	hold	hold	VERB
fuelectenerg-6011	85	21	electrons	electron	NOUN
fuelectenerg-6011	85	22	for	for	ADP
fuelectenerg-6011	85	23	longer	long	ADJ
fuelectenerg-6011	85	24	time	time	NOUN
fuelectenerg-6011	85	25	and	and	CCONJ
fuelectenerg-6011	85	26	thus	thus	ADV
fuelectenerg-6011	85	27	the	the	DET
fuelectenerg-6011	85	28	memory	memory	NOUN
fuelectenerg-6011	85	29	effects	effect	NOUN
fuelectenerg-6011	85	30	of	of	ADP
fuelectenerg-6011	85	31	au	au	ADV
fuelectenerg-6011	85	32	and	and	CCONJ
fuelectenerg-6011	85	33	pt	pt	PROPN
fuelectenerg-6011	85	34	are	be	AUX
fuelectenerg-6011	85	35	better	well	ADJ
fuelectenerg-6011	85	36	than	than	ADP
fuelectenerg-6011	85	37	the	the	DET
fuelectenerg-6011	85	38	ag	ag	PROPN
fuelectenerg-6011	85	39	.	.	PROPN
fuelectenerg-6011	85	40	chungho	chungho	PROPN
fuelectenerg-6011	85	41	lee	lee	PROPN
fuelectenerg-6011	85	42	et	et	PROPN
fuelectenerg-6011	85	43	.	.	PUNCT
fuelectenerg-6011	86	1	al	al	PROPN
fuelectenerg-6011	86	2	.	.	PUNCT
fuelectenerg-6011	87	1	[	[	X
fuelectenerg-6011	87	2	17	17	NUM
fuelectenerg-6011	87	3	]	]	PUNCT
fuelectenerg-6011	87	4	in	in	ADP
fuelectenerg-6011	87	5	2005	2005	NUM
fuelectenerg-6011	87	6	fabricated	fabricate	VERB
fuelectenerg-6011	87	7	and	and	CCONJ
fuelectenerg-6011	87	8	characterized	characterize	VERB
fuelectenerg-6011	87	9	the	the	DET
fuelectenerg-6011	87	10	heterogeneousstack	heterogeneousstack	NOUN
fuelectenerg-6011	87	11	devices	device	NOUN
fuelectenerg-6011	87	12	consisting	consist	VERB
fuelectenerg-6011	87	13	of	of	ADP
fuelectenerg-6011	87	14	metal	metal	NOUN
fuelectenerg-6011	87	15	nanocrystals	nanocrystal	NOUN
fuelectenerg-6011	87	16	(	(	PUNCT
fuelectenerg-6011	87	17	au	au	ADJ
fuelectenerg-6011	87	18	)	)	PUNCT
fuelectenerg-6011	87	19	and	and	CCONJ
fuelectenerg-6011	87	20	silicon	silicon	NOUN
fuelectenerg-6011	87	21	nitride	nitride	NOUN
fuelectenerg-6011	87	22	(	(	PUNCT
fuelectenerg-6011	87	23	si3n4	si3n4	PROPN
fuelectenerg-6011	87	24	)	)	PUNCT
fuelectenerg-6011	87	25	.	.	PUNCT
fuelectenerg-6011	88	1	the	the	DET
fuelectenerg-6011	88	2	metal	metal	NOUN
fuelectenerg-6011	88	3	nanocrystals	nanocrystal	NOUN
fuelectenerg-6011	88	4	at	at	ADP
fuelectenerg-6011	88	5	the	the	DET
fuelectenerg-6011	88	6	lower	low	ADJ
fuelectenerg-6011	88	7	stack	stack	NOUN
fuelectenerg-6011	88	8	allow	allow	VERB
fuelectenerg-6011	88	9	the	the	DET
fuelectenerg-6011	88	10	direct	direct	ADJ
fuelectenerg-6011	88	11	tunneling	tunneling	NOUN
fuelectenerg-6011	88	12	mechanism	mechanism	NOUN
fuelectenerg-6011	88	13	during	during	ADP
fuelectenerg-6011	88	14	program	program	NOUN
fuelectenerg-6011	88	15	/	/	SYM
fuelectenerg-6011	88	16	erase	erase	NOUN
fuelectenerg-6011	88	17	to	to	PART
fuelectenerg-6011	88	18	achieve	achieve	VERB
fuelectenerg-6011	88	19	low	low	ADJ
fuelectenerg-6011	88	20	-	-	PUNCT
fuelectenerg-6011	88	21	voltage	voltage	NOUN
fuelectenerg-6011	88	22	operation	operation	NOUN
fuelectenerg-6011	88	23	and	and	CCONJ
fuelectenerg-6011	88	24	good	good	ADJ
fuelectenerg-6011	88	25	endurance	endurance	NOUN
fuelectenerg-6011	88	26	while	while	SCONJ
fuelectenerg-6011	88	27	the	the	DET
fuelectenerg-6011	88	28	nitride	nitride	ADJ
fuelectenerg-6011	88	29	layer	layer	NOUN
fuelectenerg-6011	88	30	at	at	ADP
fuelectenerg-6011	88	31	the	the	DET
fuelectenerg-6011	88	32	upper	upper	ADJ
fuelectenerg-6011	88	33	stack	stack	NOUN
fuelectenerg-6011	88	34	acts	act	VERB
fuelectenerg-6011	88	35	as	as	ADP
fuelectenerg-6011	88	36	an	an	DET
fuelectenerg-6011	88	37	additional	additional	ADJ
fuelectenerg-6011	88	38	charge	charge	NOUN
fuelectenerg-6011	88	39	trap	trap	NOUN
fuelectenerg-6011	88	40	layer	layer	NOUN
fuelectenerg-6011	88	41	to	to	PART
fuelectenerg-6011	88	42	increase	increase	VERB
fuelectenerg-6011	88	43	the	the	DET
fuelectenerg-6011	88	44	memory	memory	NOUN
fuelectenerg-6011	88	45	window	window	NOUN
fuelectenerg-6011	88	46	and	and	CCONJ
fuelectenerg-6011	88	47	significantly	significantly	ADV
fuelectenerg-6011	88	48	improve	improve	VERB
fuelectenerg-6011	88	49	the	the	DET
fuelectenerg-6011	88	50	retention	retention	NOUN
fuelectenerg-6011	88	51	time	time	NOUN
fuelectenerg-6011	88	52	.	.	PUNCT
fuelectenerg-6011	89	1	semiconductor	semiconductor	NOUN
fuelectenerg-6011	89	2	nanocrystal	nanocrystal	NOUN
fuelectenerg-6011	89	3	(	(	PUNCT
fuelectenerg-6011	89	4	si	si	NOUN
fuelectenerg-6011	89	5	)	)	PUNCT
fuelectenerg-6011	89	6	and	and	CCONJ
fuelectenerg-6011	89	7	nitride	nitride	ADJ
fuelectenerg-6011	89	8	heterogeneous	heterogeneous	ADJ
fuelectenerg-6011	89	9	stacks	stack	NOUN
fuelectenerg-6011	89	10	have	have	AUX
fuelectenerg-6011	89	11	been	be	AUX
fuelectenerg-6011	89	12	first	first	ADV
fuelectenerg-6011	89	13	proposed	propose	VERB
fuelectenerg-6011	89	14	in	in	ADP
fuelectenerg-6011	89	15	metal	metal	NOUN
fuelectenerg-6011	89	16	–	–	PUNCT
fuelectenerg-6011	89	17	nitride	nitride	NOUN
fuelectenerg-6011	89	18	–	–	PUNCT
fuelectenerg-6011	89	19	oxide	oxide	NOUN
fuelectenerg-6011	89	20	–	–	PUNCT
fuelectenerg-6011	89	21	silicon	silicon	NOUN
fuelectenerg-6011	89	22	(	(	PUNCT
fuelectenerg-6011	89	23	mnos	mno	NOUN
fuelectenerg-6011	89	24	)	)	PUNCT
fuelectenerg-6011	89	25	structure	structure	NOUN
fuelectenerg-6011	89	26	by	by	ADP
fuelectenerg-6011	89	27	yamazaki	yamazaki	PROPN
fuelectenerg-6011	89	28	et	et	PROPN
fuelectenerg-6011	89	29	al	al	PROPN
fuelectenerg-6011	89	30	.	.	PUNCT
fuelectenerg-6011	90	1	[	[	X
fuelectenerg-6011	90	2	18	18	NUM
fuelectenerg-6011	90	3	,	,	PUNCT
fuelectenerg-6011	90	4	19	19	NUM
fuelectenerg-6011	90	5	]	]	PUNCT
fuelectenerg-6011	90	6	and	and	CCONJ
fuelectenerg-6011	90	7	sonos	sonos	PROPN
fuelectenerg-6011	90	8	structure	structure	NOUN
fuelectenerg-6011	90	9	by	by	ADP
fuelectenerg-6011	90	10	steimle	steimle	NOUN
fuelectenerg-6011	90	11	et	et	PROPN
fuelectenerg-6011	90	12	al	al	PROPN
fuelectenerg-6011	90	13	.	.	PUNCT
fuelectenerg-6011	91	1	[	[	X
fuelectenerg-6011	91	2	20	20	NUM
fuelectenerg-6011	91	3	,	,	PUNCT
fuelectenerg-6011	91	4	21	21	NUM
fuelectenerg-6011	91	5	]	]	PUNCT
fuelectenerg-6011	91	6	.	.	PUNCT
fuelectenerg-6011	92	1	the	the	DET
fuelectenerg-6011	92	2	nanocrystal	nanocrystal	PROPN
fuelectenerg-6011	92	3	/	/	SYM
fuelectenerg-6011	92	4	nitride	nitride	ADJ
fuelectenerg-6011	92	5	heterogeneous	heterogeneous	ADJ
fuelectenerg-6011	92	6	stack	stack	NOUN
fuelectenerg-6011	92	7	shows	show	NOUN
fuelectenerg-6011	92	8	enlarged	enlarge	VERB
fuelectenerg-6011	92	9	charge	charge	NOUN
fuelectenerg-6011	92	10	storage	storage	NOUN
fuelectenerg-6011	92	11	capacity	capacity	NOUN
fuelectenerg-6011	92	12	,	,	PUNCT
fuelectenerg-6011	92	13	longer	long	ADJ
fuelectenerg-6011	92	14	retention	retention	NOUN
fuelectenerg-6011	92	15	,	,	PUNCT
fuelectenerg-6011	92	16	low	low	ADJ
fuelectenerg-6011	92	17	voltage	voltage	NOUN
fuelectenerg-6011	92	18	and	and	CCONJ
fuelectenerg-6011	92	19	fast	fast	VERB
fuelectenerg-6011	92	20	p	p	X
fuelectenerg-6011	92	21	/	/	SYM
fuelectenerg-6011	92	22	e	e	NOUN
fuelectenerg-6011	92	23	by	by	ADP
fuelectenerg-6011	92	24	additional	additional	ADJ
fuelectenerg-6011	92	25	nitride	nitride	ADJ
fuelectenerg-6011	92	26	traps	trap	NOUN
fuelectenerg-6011	92	27	as	as	SCONJ
fuelectenerg-6011	92	28	compared	compare	VERB
fuelectenerg-6011	92	29	to	to	ADP
fuelectenerg-6011	92	30	au	au	VERB
fuelectenerg-6011	92	31	nanocrystals	nanocrystal	NOUN
fuelectenerg-6011	92	32	.	.	PUNCT
fuelectenerg-6011	93	1	ch	ch	PROPN
fuelectenerg-6011	93	2	sargentis	sargentis	PROPN
fuelectenerg-6011	93	3	et	et	PROPN
fuelectenerg-6011	93	4	.	.	PUNCT
fuelectenerg-6011	94	1	al	al	PROPN
fuelectenerg-6011	95	1	[	[	X
fuelectenerg-6011	95	2	22	22	NUM
fuelectenerg-6011	95	3	]	]	PUNCT
fuelectenerg-6011	95	4	in	in	ADP
fuelectenerg-6011	95	5	2005	2005	NUM
fuelectenerg-6011	95	6	fabricated	fabricate	VERB
fuelectenerg-6011	95	7	a	a	DET
fuelectenerg-6011	95	8	novel	novel	ADJ
fuelectenerg-6011	95	9	mos	mos	NOUN
fuelectenerg-6011	95	10	memory	memory	NOUN
fuelectenerg-6011	95	11	device	device	NOUN
fuelectenerg-6011	95	12	with	with	ADP
fuelectenerg-6011	95	13	platinum	platinum	NOUN
fuelectenerg-6011	95	14	(	(	PUNCT
fuelectenerg-6011	95	15	pt	pt	NOUN
fuelectenerg-6011	95	16	)	)	PUNCT
fuelectenerg-6011	95	17	nanoparticles	nanoparticle	NOUN
fuelectenerg-6011	95	18	embedded	embed	VERB
fuelectenerg-6011	95	19	in	in	ADP
fuelectenerg-6011	95	20	the	the	DET
fuelectenerg-6011	95	21	hfo2	hfo2	NOUN
fuelectenerg-6011	95	22	/sio2	/sio2	PROPN
fuelectenerg-6011	95	23	interface	interface	NOUN
fuelectenerg-6011	95	24	which	which	PRON
fuelectenerg-6011	95	25	exhibits	exhibit	VERB
fuelectenerg-6011	95	26	flash	flash	NOUN
fuelectenerg-6011	95	27	memory	memory	NOUN
fuelectenerg-6011	95	28	devices	device	NOUN
fuelectenerg-6011	95	29	with	with	ADP
fuelectenerg-6011	95	30	metal	metal	NOUN
fuelectenerg-6011	95	31	floating	float	VERB
fuelectenerg-6011	95	32	gate	gate	NOUN
fuelectenerg-6011	95	33	/	/	SYM
fuelectenerg-6011	95	34	metal	metal	NOUN
fuelectenerg-6011	95	35	nanocrystals	nanocrystal	NOUN
fuelectenerg-6011	95	36	as	as	ADP
fuelectenerg-6011	95	37	the	the	DET
fuelectenerg-6011	95	38	charge	charge	NOUN
fuelectenerg-6011	95	39	storage	storage	NOUN
fuelectenerg-6011	95	40	layer	layer	NOUN
fuelectenerg-6011	95	41	161	161	NUM
fuelectenerg-6011	95	42	clear	clear	ADJ
fuelectenerg-6011	95	43	hysteresis	hysteresis	NOUN
fuelectenerg-6011	95	44	behavior	behavior	NOUN
fuelectenerg-6011	95	45	and	and	CCONJ
fuelectenerg-6011	95	46	is	be	AUX
fuelectenerg-6011	95	47	attributed	attribute	VERB
fuelectenerg-6011	95	48	to	to	ADP
fuelectenerg-6011	95	49	the	the	DET
fuelectenerg-6011	95	50	charge	charge	NOUN
fuelectenerg-6011	95	51	storage	storage	NOUN
fuelectenerg-6011	95	52	in	in	ADP
fuelectenerg-6011	95	53	the	the	DET
fuelectenerg-6011	95	54	nanoparticles	nanoparticle	NOUN
fuelectenerg-6011	95	55	.	.	PUNCT
fuelectenerg-6011	96	1	jong	jong	PROPN
fuelectenerg-6011	96	2	jin	jin	PROPN
fuelectenerg-6011	96	3	lee	lee	PROPN
fuelectenerg-6011	96	4	and	and	CCONJ
fuelectenerg-6011	96	5	dim	dim	PROPN
fuelectenerg-6011	96	6	-	-	PUNCT
fuelectenerg-6011	96	7	lee	lee	PROPN
fuelectenerg-6011	96	8	kwong	kwong	PROPN
fuelectenerg-6011	97	1	[	[	X
fuelectenerg-6011	97	2	23	23	NUM
fuelectenerg-6011	97	3	]	]	PUNCT
fuelectenerg-6011	97	4	in	in	ADP
fuelectenerg-6011	97	5	2005	2005	NUM
fuelectenerg-6011	97	6	proposed	propose	VERB
fuelectenerg-6011	97	7	a	a	DET
fuelectenerg-6011	97	8	nonvolatile	nonvolatile	ADJ
fuelectenerg-6011	97	9	memory	memory	NOUN
fuelectenerg-6011	97	10	using	use	VERB
fuelectenerg-6011	97	11	nickel	nickel	NOUN
fuelectenerg-6011	97	12	nanocrystal	nanocrystal	ADJ
fuelectenerg-6011	97	13	(	(	PUNCT
fuelectenerg-6011	97	14	nc	nc	PROPN
fuelectenerg-6011	97	15	)	)	PUNCT
fuelectenerg-6011	97	16	embedded	embed	VERB
fuelectenerg-6011	97	17	in	in	ADP
fuelectenerg-6011	97	18	hfo2	hfo2	NOUN
fuelectenerg-6011	97	19	tunneling	tunneling	NOUN
fuelectenerg-6011	97	20	/	/	SYM
fuelectenerg-6011	97	21	control	control	NOUN
fuelectenerg-6011	97	22	dielectrics	dielectric	NOUN
fuelectenerg-6011	97	23	to	to	PART
fuelectenerg-6011	97	24	overcome	overcome	VERB
fuelectenerg-6011	97	25	the	the	DET
fuelectenerg-6011	97	26	fundamental	fundamental	ADJ
fuelectenerg-6011	97	27	tradeoff	tradeoff	NOUN
fuelectenerg-6011	97	28	between	between	ADP
fuelectenerg-6011	97	29	programming	programming	NOUN
fuelectenerg-6011	97	30	and	and	CCONJ
fuelectenerg-6011	97	31	data	datum	NOUN
fuelectenerg-6011	97	32	retention	retention	NOUN
fuelectenerg-6011	97	33	characteristics	characteristic	NOUN
fuelectenerg-6011	97	34	.	.	PUNCT
fuelectenerg-6011	98	1	nickel	nickel	NOUN
fuelectenerg-6011	98	2	has	have	VERB
fuelectenerg-6011	98	3	not	not	PART
fuelectenerg-6011	98	4	only	only	ADV
fuelectenerg-6011	98	5	suitable	suitable	ADJ
fuelectenerg-6011	98	6	work	work	NOUN
fuelectenerg-6011	98	7	function	function	NOUN
fuelectenerg-6011	98	8	(	(	PUNCT
fuelectenerg-6011	98	9	4.5–4.6	4.5–4.6	NOUN
fuelectenerg-6011	98	10	ev	ev	INTJ
fuelectenerg-6011	98	11	)	)	PUNCT
fuelectenerg-6011	99	1	[	[	X
fuelectenerg-6011	99	2	24	24	NUM
fuelectenerg-6011	99	3	]	]	PUNCT
fuelectenerg-6011	99	4	for	for	ADP
fuelectenerg-6011	99	5	such	such	ADJ
fuelectenerg-6011	99	6	applications	application	NOUN
fuelectenerg-6011	100	1	but	but	CCONJ
fuelectenerg-6011	100	2	it	it	PRON
fuelectenerg-6011	100	3	also	also	ADV
fuelectenerg-6011	100	4	exhibits	exhibit	VERB
fuelectenerg-6011	100	5	a	a	DET
fuelectenerg-6011	100	6	low	low	ADJ
fuelectenerg-6011	100	7	anneal	anneal	ADJ
fuelectenerg-6011	100	8	temperature	temperature	NOUN
fuelectenerg-6011	100	9	for	for	ADP
fuelectenerg-6011	100	10	nc	nc	PROPN
fuelectenerg-6011	100	11	formation	formation	NOUN
fuelectenerg-6011	100	12	which	which	PRON
fuelectenerg-6011	100	13	is	be	AUX
fuelectenerg-6011	100	14	advantageous	advantageous	ADJ
fuelectenerg-6011	100	15	to	to	ADP
fuelectenerg-6011	100	16	the	the	DET
fuelectenerg-6011	100	17	quality	quality	NOUN
fuelectenerg-6011	100	18	of	of	ADP
fuelectenerg-6011	100	19	underlying	underlie	VERB
fuelectenerg-6011	100	20	tunneling	tunneling	NOUN
fuelectenerg-6011	100	21	hfo2	hfo2	NOUN
fuelectenerg-6011	100	22	dielectrics	dielectric	NOUN
fuelectenerg-6011	100	23	(	(	PUNCT
fuelectenerg-6011	100	24	5.1	5.1	NUM
fuelectenerg-6011	100	25	nm	nm	NOUN
fuelectenerg-6011	100	26	)	)	PUNCT
fuelectenerg-6011	100	27	.	.	PUNCT
fuelectenerg-6011	101	1	hei	hei	PROPN
fuelectenerg-6011	101	2	wong	wong	PROPN
fuelectenerg-6011	101	3	and	and	CCONJ
fuelectenerg-6011	101	4	hiroshi	hiroshi	PROPN
fuelectenerg-6011	101	5	iwai	iwai	PROPN
fuelectenerg-6011	101	6	in	in	ADP
fuelectenerg-6011	101	7	2006	2006	NUM
fuelectenerg-6011	101	8	[	[	X
fuelectenerg-6011	101	9	25	25	NUM
fuelectenerg-6011	101	10	]	]	PUNCT
fuelectenerg-6011	101	11	suggested	suggest	VERB
fuelectenerg-6011	101	12	that	that	SCONJ
fuelectenerg-6011	101	13	the	the	DET
fuelectenerg-6011	101	14	conventional	conventional	ADJ
fuelectenerg-6011	101	15	oxide	oxide	NOUN
fuelectenerg-6011	101	16	can	can	AUX
fuelectenerg-6011	101	17	be	be	AUX
fuelectenerg-6011	101	18	scaled	scale	VERB
fuelectenerg-6011	101	19	down	down	ADP
fuelectenerg-6011	101	20	to	to	ADP
fuelectenerg-6011	101	21	two	two	NUM
fuelectenerg-6011	101	22	atomic	atomic	ADJ
fuelectenerg-6011	101	23	layers	layer	NOUN
fuelectenerg-6011	101	24	of	of	ADP
fuelectenerg-6011	101	25	about	about	ADP
fuelectenerg-6011	101	26	7a	7a	NOUN
fuelectenerg-6011	101	27	˚	˚	NOUN
fuelectenerg-6011	101	28	but	but	CCONJ
fuelectenerg-6011	101	29	this	this	PRON
fuelectenerg-6011	101	30	is	be	AUX
fuelectenerg-6011	101	31	not	not	PART
fuelectenerg-6011	101	32	viable	viable	ADJ
fuelectenerg-6011	101	33	in	in	ADP
fuelectenerg-6011	101	34	practice	practice	NOUN
fuelectenerg-6011	101	35	because	because	SCONJ
fuelectenerg-6011	101	36	of	of	ADP
fuelectenerg-6011	101	37	the	the	DET
fuelectenerg-6011	101	38	non	non	NOUN
fuelectenerg-6011	101	39	-	-	NOUN
fuelectenerg-6011	101	40	scalabilities	scalability	NOUN
fuelectenerg-6011	101	41	of	of	ADP
fuelectenerg-6011	101	42	interface	interface	NOUN
fuelectenerg-6011	101	43	,	,	PUNCT
fuelectenerg-6011	101	44	trap	trap	NOUN
fuelectenerg-6011	101	45	capture	capture	NOUN
fuelectenerg-6011	101	46	cross	cross	NOUN
fuelectenerg-6011	101	47	-	-	NOUN
fuelectenerg-6011	101	48	section	section	ADJ
fuelectenerg-6011	101	49	,	,	PUNCT
fuelectenerg-6011	101	50	leakage	leakage	NOUN
fuelectenerg-6011	101	51	current	current	NOUN
fuelectenerg-6011	101	52	and	and	CCONJ
fuelectenerg-6011	101	53	the	the	DET
fuelectenerg-6011	101	54	statistical	statistical	ADJ
fuelectenerg-6011	101	55	parameters	parameter	NOUN
fuelectenerg-6011	101	56	of	of	ADP
fuelectenerg-6011	101	57	fabrication	fabrication	NOUN
fuelectenerg-6011	101	58	processes	process	NOUN
fuelectenerg-6011	101	59	.	.	PUNCT
fuelectenerg-6011	102	1	physically	physically	ADV
fuelectenerg-6011	102	2	thicker	thick	ADJ
fuelectenerg-6011	102	3	high	high	ADJ
fuelectenerg-6011	102	4	-	-	PUNCT
fuelectenerg-6011	102	5	k	k	NOUN
fuelectenerg-6011	102	6	material	material	NOUN
fuelectenerg-6011	102	7	can	can	AUX
fuelectenerg-6011	102	8	help	help	VERB
fuelectenerg-6011	102	9	to	to	PART
fuelectenerg-6011	102	10	solve	solve	VERB
fuelectenerg-6011	102	11	most	most	ADJ
fuelectenerg-6011	102	12	of	of	ADP
fuelectenerg-6011	102	13	the	the	DET
fuelectenerg-6011	102	14	problems	problem	NOUN
fuelectenerg-6011	102	15	but	but	CCONJ
fuelectenerg-6011	102	16	high	high	ADJ
fuelectenerg-6011	102	17	-	-	PUNCT
fuelectenerg-6011	102	18	k	k	NOUN
fuelectenerg-6011	102	19	gate	gate	PROPN
fuelectenerg-6011	102	20	dielectric	dielectric	ADJ
fuelectenerg-6011	102	21	film	film	NOUN
fuelectenerg-6011	102	22	still	still	ADV
fuelectenerg-6011	102	23	give	give	VERB
fuelectenerg-6011	102	24	rise	rise	NOUN
fuelectenerg-6011	102	25	to	to	ADP
fuelectenerg-6011	102	26	several	several	ADJ
fuelectenerg-6011	102	27	reliability	reliability	NOUN
fuelectenerg-6011	102	28	problems	problem	NOUN
fuelectenerg-6011	102	29	and	and	CCONJ
fuelectenerg-6011	102	30	degrades	degrade	VERB
fuelectenerg-6011	102	31	the	the	DET
fuelectenerg-6011	102	32	performances	performance	NOUN
fuelectenerg-6011	102	33	of	of	ADP
fuelectenerg-6011	102	34	the	the	DET
fuelectenerg-6011	102	35	mos	mos	PROPN
fuelectenerg-6011	102	36	devices	device	NOUN
fuelectenerg-6011	102	37	to	to	ADP
fuelectenerg-6011	102	38	a	a	DET
fuelectenerg-6011	102	39	great	great	ADJ
fuelectenerg-6011	102	40	extent	extent	NOUN
fuelectenerg-6011	102	41	.	.	PUNCT
fuelectenerg-6011	103	1	bulk	bulk	ADJ
fuelectenerg-6011	103	2	oxynitride	oxynitride	ADJ
fuelectenerg-6011	103	3	/	/	SYM
fuelectenerg-6011	103	4	high	high	ADJ
fuelectenerg-6011	103	5	-	-	PUNCT
fuelectenerg-6011	103	6	k	k	NOUN
fuelectenerg-6011	103	7	stack	stack	NOUN
fuelectenerg-6011	103	8	could	could	AUX
fuelectenerg-6011	103	9	be	be	AUX
fuelectenerg-6011	103	10	a	a	DET
fuelectenerg-6011	103	11	secure	secure	ADJ
fuelectenerg-6011	103	12	solution	solution	NOUN
fuelectenerg-6011	103	13	to	to	ADP
fuelectenerg-6011	103	14	this	this	DET
fuelectenerg-6011	103	15	problem	problem	NOUN
fuelectenerg-6011	103	16	.	.	PUNCT
fuelectenerg-6011	104	1	the	the	DET
fuelectenerg-6011	104	2	major	major	ADJ
fuelectenerg-6011	104	3	benefits	benefit	NOUN
fuelectenerg-6011	104	4	of	of	ADP
fuelectenerg-6011	104	5	oxynitride	oxynitride	NOUN
fuelectenerg-6011	104	6	are	be	AUX
fuelectenerg-6011	104	7	that	that	SCONJ
fuelectenerg-6011	104	8	most	most	ADJ
fuelectenerg-6011	104	9	of	of	ADP
fuelectenerg-6011	104	10	its	its	PRON
fuelectenerg-6011	104	11	material	material	NOUN
fuelectenerg-6011	104	12	characteristics	characteristic	NOUN
fuelectenerg-6011	104	13	are	be	AUX
fuelectenerg-6011	104	14	second	second	ADJ
fuelectenerg-6011	104	15	to	to	PART
fuelectenerg-6011	104	16	sio2	sio2	VERB
fuelectenerg-6011	104	17	but	but	CCONJ
fuelectenerg-6011	104	18	with	with	ADP
fuelectenerg-6011	104	19	a	a	DET
fuelectenerg-6011	104	20	larger	large	ADJ
fuelectenerg-6011	104	21	value	value	NOUN
fuelectenerg-6011	104	22	of	of	ADP
fuelectenerg-6011	104	23	dielectric	dielectric	ADJ
fuelectenerg-6011	104	24	constant	constant	ADJ
fuelectenerg-6011	104	25	(	(	PUNCT
fuelectenerg-6011	104	26	3.9	3.9	NUM
fuelectenerg-6011	104	27	-	-	SYM
fuelectenerg-6011	104	28	7.8	7.8	NUM
fuelectenerg-6011	104	29	)	)	PUNCT
fuelectenerg-6011	104	30	,	,	PUNCT
fuelectenerg-6011	104	31	band	band	NOUN
fuelectenerg-6011	104	32	gap	gap	NOUN
fuelectenerg-6011	104	33	within	within	ADP
fuelectenerg-6011	104	34	5.9–8.9	5.9–8.9	NUM
fuelectenerg-6011	104	35	ev	ev	ADJ
fuelectenerg-6011	104	36	,	,	PUNCT
fuelectenerg-6011	104	37	conduction	conduction	NOUN
fuelectenerg-6011	104	38	band	band	NOUN
fuelectenerg-6011	104	39	offset	offset	VERB
fuelectenerg-6011	104	40	greater	great	ADJ
fuelectenerg-6011	104	41	than	than	ADP
fuelectenerg-6011	104	42	2.1	2.1	NUM
fuelectenerg-6011	104	43	ev	ev	VERB
fuelectenerg-6011	104	44	,	,	PUNCT
fuelectenerg-6011	104	45	thermally	thermally	ADV
fuelectenerg-6011	104	46	stable	stable	ADJ
fuelectenerg-6011	104	47	structure	structure	NOUN
fuelectenerg-6011	104	48	with	with	ADP
fuelectenerg-6011	104	49	high	high	ADJ
fuelectenerg-6011	104	50	crystallization	crystallization	NOUN
fuelectenerg-6011	104	51	temperature	temperature	NOUN
fuelectenerg-6011	104	52	and	and	CCONJ
fuelectenerg-6011	104	53	stable	stable	ADJ
fuelectenerg-6011	104	54	on	on	ADP
fuelectenerg-6011	104	55	silicon	silicon	NOUN
fuelectenerg-6011	104	56	.	.	PUNCT
fuelectenerg-6011	105	1	it	it	PRON
fuelectenerg-6011	105	2	also	also	ADV
fuelectenerg-6011	105	3	has	have	VERB
fuelectenerg-6011	105	4	a	a	DET
fuelectenerg-6011	105	5	comparatively	comparatively	ADV
fuelectenerg-6011	105	6	better	well	ADJ
fuelectenerg-6011	105	7	dielectric	dielectric	NOUN
fuelectenerg-6011	105	8	/	/	SYM
fuelectenerg-6011	105	9	si	si	NOUN
fuelectenerg-6011	105	10	interface	interface	NOUN
fuelectenerg-6011	105	11	when	when	SCONJ
fuelectenerg-6011	105	12	compared	compare	VERB
fuelectenerg-6011	105	13	to	to	ADP
fuelectenerg-6011	105	14	other	other	ADJ
fuelectenerg-6011	105	15	high	high	ADJ
fuelectenerg-6011	105	16	-	-	PUNCT
fuelectenerg-6011	105	17	k	k	NOUN
fuelectenerg-6011	105	18	competitors	competitor	NOUN
fuelectenerg-6011	105	19	.	.	PUNCT
fuelectenerg-6011	106	1	these	these	DET
fuelectenerg-6011	106	2	properties	property	NOUN
fuelectenerg-6011	106	3	are	be	AUX
fuelectenerg-6011	106	4	sufficient	sufficient	ADJ
fuelectenerg-6011	106	5	for	for	ADP
fuelectenerg-6011	106	6	mos	mos	ADJ
fuelectenerg-6011	106	7	device	device	NOUN
fuelectenerg-6011	106	8	applications	application	NOUN
fuelectenerg-6011	106	9	.	.	PUNCT
fuelectenerg-6011	107	1	but	but	CCONJ
fuelectenerg-6011	107	2	the	the	DET
fuelectenerg-6011	107	3	two	two	NUM
fuelectenerg-6011	107	4	atomic	atomic	ADJ
fuelectenerg-6011	107	5	-	-	PUNCT
fuelectenerg-6011	107	6	layer	layer	NOUN
fuelectenerg-6011	107	7	oxynitride	oxynitride	NOUN
fuelectenerg-6011	107	8	will	will	AUX
fuelectenerg-6011	107	9	not	not	PART
fuelectenerg-6011	107	10	be	be	AUX
fuelectenerg-6011	107	11	synthesized	synthesize	VERB
fuelectenerg-6011	107	12	and	and	CCONJ
fuelectenerg-6011	107	13	the	the	DET
fuelectenerg-6011	107	14	leakage	leakage	NOUN
fuelectenerg-6011	107	15	current	current	NOUN
fuelectenerg-6011	107	16	will	will	AUX
fuelectenerg-6011	107	17	be	be	AUX
fuelectenerg-6011	107	18	too	too	ADV
fuelectenerg-6011	107	19	large	large	ADJ
fuelectenerg-6011	107	20	as	as	ADV
fuelectenerg-6011	107	21	well	well	ADV
fuelectenerg-6011	107	22	.	.	PUNCT
fuelectenerg-6011	108	1	therefore	therefore	ADV
fuelectenerg-6011	108	2	,	,	PUNCT
fuelectenerg-6011	108	3	a	a	DET
fuelectenerg-6011	108	4	better	well	ADJ
fuelectenerg-6011	108	5	solution	solution	NOUN
fuelectenerg-6011	108	6	is	be	AUX
fuelectenerg-6011	108	7	to	to	PART
fuelectenerg-6011	108	8	make	make	VERB
fuelectenerg-6011	108	9	use	use	NOUN
fuelectenerg-6011	108	10	of	of	ADP
fuelectenerg-6011	108	11	the	the	DET
fuelectenerg-6011	108	12	bulk	bulk	ADJ
fuelectenerg-6011	108	13	oxynitride	oxynitride	ADJ
fuelectenerg-6011	108	14	/	/	SYM
fuelectenerg-6011	108	15	high	high	ADJ
fuelectenerg-6011	108	16	-	-	PUNCT
fuelectenerg-6011	108	17	k	k	NOUN
fuelectenerg-6011	108	18	stack	stack	NOUN
fuelectenerg-6011	108	19	to	to	PART
fuelectenerg-6011	108	20	make	make	VERB
fuelectenerg-6011	108	21	it	it	PRON
fuelectenerg-6011	108	22	physically	physically	ADV
fuelectenerg-6011	108	23	thicker	thick	ADJ
fuelectenerg-6011	108	24	and	and	CCONJ
fuelectenerg-6011	108	25	thus	thus	ADV
fuelectenerg-6011	108	26	reduce	reduce	VERB
fuelectenerg-6011	108	27	the	the	DET
fuelectenerg-6011	108	28	gate	gate	NOUN
fuelectenerg-6011	108	29	tunneling	tunneling	PROPN
fuelectenerg-6011	108	30	current	current	NOUN
fuelectenerg-6011	108	31	and	and	CCONJ
fuelectenerg-6011	108	32	the	the	DET
fuelectenerg-6011	108	33	sensitivity	sensitivity	NOUN
fuelectenerg-6011	108	34	to	to	ADP
fuelectenerg-6011	108	35	thickness	thickness	NOUN
fuelectenerg-6011	108	36	fluctuation	fluctuation	NOUN
fuelectenerg-6011	108	37	.	.	PUNCT
fuelectenerg-6011	109	1	due	due	ADP
fuelectenerg-6011	109	2	to	to	ADP
fuelectenerg-6011	109	3	the	the	DET
fuelectenerg-6011	109	4	fabrication	fabrication	NOUN
fuelectenerg-6011	109	5	methods	method	NOUN
fuelectenerg-6011	109	6	,	,	PUNCT
fuelectenerg-6011	109	7	most	most	ADJ
fuelectenerg-6011	109	8	of	of	ADP
fuelectenerg-6011	109	9	the	the	DET
fuelectenerg-6011	109	10	defects	defect	NOUN
fuelectenerg-6011	109	11	in	in	ADP
fuelectenerg-6011	109	12	oxynitride	oxynitride	ADJ
fuelectenerg-6011	109	13	are	be	AUX
fuelectenerg-6011	109	14	tied	tie	VERB
fuelectenerg-6011	109	15	to	to	ADP
fuelectenerg-6011	109	16	the	the	DET
fuelectenerg-6011	109	17	hydrogen	hydrogen	NOUN
fuelectenerg-6011	109	18	and	and	CCONJ
fuelectenerg-6011	109	19	hydroxyl	hydroxyl	NOUN
fuelectenerg-6011	109	20	groups	group	NOUN
fuelectenerg-6011	109	21	and	and	CCONJ
fuelectenerg-6011	109	22	are	be	AUX
fuelectenerg-6011	109	23	the	the	DET
fuelectenerg-6011	109	24	major	major	ADJ
fuelectenerg-6011	109	25	sources	source	NOUN
fuelectenerg-6011	109	26	for	for	ADP
fuelectenerg-6011	109	27	hot	hot	ADJ
fuelectenerg-6011	109	28	-	-	PUNCT
fuelectenerg-6011	109	29	carrier	carrier	NOUN
fuelectenerg-6011	109	30	induced	induce	VERB
fuelectenerg-6011	109	31	related	relate	VERB
fuelectenerg-6011	109	32	trap	trap	NOUN
fuelectenerg-6011	109	33	generation	generation	NOUN
fuelectenerg-6011	109	34	in	in	ADP
fuelectenerg-6011	109	35	nitrided	nitrided	ADJ
fuelectenerg-6011	109	36	oxide	oxide	NOUN
fuelectenerg-6011	109	37	films	film	NOUN
fuelectenerg-6011	110	1	[	[	X
fuelectenerg-6011	110	2	26	26	NUM
fuelectenerg-6011	110	3	-	-	SYM
fuelectenerg-6011	110	4	29	29	NUM
fuelectenerg-6011	110	5	]	]	PUNCT
fuelectenerg-6011	110	6	.	.	PUNCT
fuelectenerg-6011	111	1	hence	hence	ADV
fuelectenerg-6011	111	2	it	it	PRON
fuelectenerg-6011	111	3	is	be	AUX
fuelectenerg-6011	111	4	very	very	ADV
fuelectenerg-6011	111	5	important	important	ADJ
fuelectenerg-6011	111	6	to	to	PART
fuelectenerg-6011	111	7	minimize	minimize	VERB
fuelectenerg-6011	111	8	the	the	DET
fuelectenerg-6011	111	9	hydrogen	hydrogen	NOUN
fuelectenerg-6011	111	10	incorporation	incorporation	NOUN
fuelectenerg-6011	111	11	for	for	ADP
fuelectenerg-6011	111	12	a	a	DET
fuelectenerg-6011	111	13	highly	highly	ADV
fuelectenerg-6011	111	14	reliable	reliable	ADJ
fuelectenerg-6011	111	15	oxynitride	oxynitride	ADJ
fuelectenerg-6011	111	16	film	film	NOUN
fuelectenerg-6011	111	17	for	for	ADP
fuelectenerg-6011	111	18	advanced	advanced	ADJ
fuelectenerg-6011	111	19	mos	mos	NOUN
fuelectenerg-6011	111	20	device	device	NOUN
fuelectenerg-6011	111	21	applications	application	NOUN
fuelectenerg-6011	111	22	.	.	PUNCT
fuelectenerg-6011	112	1	s.	s.	PROPN
fuelectenerg-6011	112	2	hwang	hwang	PROPN
fuelectenerg-6011	112	3	et	et	PROPN
fuelectenerg-6011	112	4	.	.	PUNCT
fuelectenerg-6011	113	1	al	al	PROPN
fuelectenerg-6011	114	1	[	[	X
fuelectenerg-6011	114	2	30	30	NUM
fuelectenerg-6011	114	3	]	]	PUNCT
fuelectenerg-6011	114	4	in	in	ADP
fuelectenerg-6011	114	5	2007	2007	NUM
fuelectenerg-6011	114	6	studied	study	VERB
fuelectenerg-6011	114	7	the	the	DET
fuelectenerg-6011	114	8	effect	effect	NOUN
fuelectenerg-6011	114	9	of	of	ADP
fuelectenerg-6011	114	10	the	the	DET
fuelectenerg-6011	114	11	presence	presence	NOUN
fuelectenerg-6011	114	12	of	of	ADP
fuelectenerg-6011	114	13	high	high	ADJ
fuelectenerg-6011	114	14	concentration	concentration	NOUN
fuelectenerg-6011	114	15	of	of	ADP
fuelectenerg-6011	114	16	nitrogen	nitrogen	NOUN
fuelectenerg-6011	114	17	in	in	ADP
fuelectenerg-6011	114	18	silicon	silicon	NOUN
fuelectenerg-6011	114	19	-	-	PUNCT
fuelectenerg-6011	114	20	oxide	oxide	NOUN
fuelectenerg-6011	114	21	layer	layer	NOUN
fuelectenerg-6011	114	22	.	.	PUNCT
fuelectenerg-6011	115	1	the	the	DET
fuelectenerg-6011	115	2	results	result	NOUN
fuelectenerg-6011	115	3	reveal	reveal	VERB
fuelectenerg-6011	115	4	the	the	DET
fuelectenerg-6011	115	5	suitability	suitability	NOUN
fuelectenerg-6011	115	6	of	of	ADP
fuelectenerg-6011	115	7	oxynitride	oxynitride	ADJ
fuelectenerg-6011	115	8	films	film	NOUN
fuelectenerg-6011	115	9	in	in	ADP
fuelectenerg-6011	115	10	high	high	ADJ
fuelectenerg-6011	115	11	quality	quality	NOUN
fuelectenerg-6011	115	12	ultra	ultra	ADJ
fuelectenerg-6011	115	13	-	-	ADJ
fuelectenerg-6011	115	14	thin	thin	ADJ
fuelectenerg-6011	115	15	-	-	PUNCT
fuelectenerg-6011	115	16	film	film	NOUN
fuelectenerg-6011	115	17	transistors	transistor	NOUN
fuelectenerg-6011	115	18	and	and	CCONJ
fuelectenerg-6011	115	19	non	non	ADJ
fuelectenerg-6011	115	20	volatile	volatile	ADJ
fuelectenerg-6011	115	21	memory	memory	NOUN
fuelectenerg-6011	115	22	device	device	NOUN
fuelectenerg-6011	115	23	.	.	PUNCT
fuelectenerg-6011	116	1	p.h	p.h	PROPN
fuelectenerg-6011	116	2	.	.	PROPN
fuelectenerg-6011	116	3	yeh	yeh	PROPN
fuelectenerg-6011	116	4	et	et	PROPN
fuelectenerg-6011	116	5	.	.	PUNCT
fuelectenerg-6011	117	1	al	al	PROPN
fuelectenerg-6011	117	2	.	.	PUNCT
fuelectenerg-6011	118	1	[	[	X
fuelectenerg-6011	118	2	31	31	NUM
fuelectenerg-6011	118	3	]	]	PUNCT
fuelectenerg-6011	118	4	in	in	ADP
fuelectenerg-6011	118	5	2007	2007	NUM
fuelectenerg-6011	118	6	review	review	NOUN
fuelectenerg-6011	118	7	the	the	DET
fuelectenerg-6011	118	8	memory	memory	NOUN
fuelectenerg-6011	118	9	effects	effect	NOUN
fuelectenerg-6011	118	10	of	of	ADP
fuelectenerg-6011	118	11	the	the	DET
fuelectenerg-6011	118	12	ni	ni	PROPN
fuelectenerg-6011	118	13	,	,	PUNCT
fuelectenerg-6011	118	14	nisi2	nisi2	NOUN
fuelectenerg-6011	118	15	,	,	PUNCT
fuelectenerg-6011	118	16	cosi2	cosi2	NOUN
fuelectenerg-6011	118	17	and	and	CCONJ
fuelectenerg-6011	118	18	nisi2	nisi2	NOUN
fuelectenerg-6011	118	19	with	with	ADP
fuelectenerg-6011	118	20	sio2	sio2	PROPN
fuelectenerg-6011	118	21	/	/	SYM
fuelectenerg-6011	118	22	hfo2	hfo2	NOUN
fuelectenerg-6011	118	23	tunneling	tunneling	NOUN
fuelectenerg-6011	118	24	dielectrics	dielectric	NOUN
fuelectenerg-6011	118	25	.	.	PUNCT
fuelectenerg-6011	119	1	it	it	PRON
fuelectenerg-6011	119	2	was	be	AUX
fuelectenerg-6011	119	3	found	find	VERB
fuelectenerg-6011	119	4	that	that	SCONJ
fuelectenerg-6011	119	5	the	the	DET
fuelectenerg-6011	119	6	memory	memory	NOUN
fuelectenerg-6011	119	7	effects	effect	NOUN
fuelectenerg-6011	119	8	of	of	ADP
fuelectenerg-6011	119	9	the	the	DET
fuelectenerg-6011	119	10	metal	metal	NOUN
fuelectenerg-6011	119	11	nanocrystals	nanocrystal	NOUN
fuelectenerg-6011	119	12	have	have	VERB
fuelectenerg-6011	119	13	strong	strong	ADJ
fuelectenerg-6011	119	14	relationship	relationship	NOUN
fuelectenerg-6011	119	15	with	with	ADP
fuelectenerg-6011	119	16	the	the	DET
fuelectenerg-6011	119	17	work	work	NOUN
fuelectenerg-6011	119	18	function	function	NOUN
fuelectenerg-6011	119	19	and	and	CCONJ
fuelectenerg-6011	119	20	the	the	DET
fuelectenerg-6011	119	21	work	work	NOUN
fuelectenerg-6011	119	22	function	function	NOUN
fuelectenerg-6011	119	23	can	can	AUX
fuelectenerg-6011	119	24	be	be	AUX
fuelectenerg-6011	119	25	modulated	modulate	VERB
fuelectenerg-6011	119	26	by	by	ADP
fuelectenerg-6011	119	27	changing	change	VERB
fuelectenerg-6011	119	28	the	the	DET
fuelectenerg-6011	119	29	metal	metal	NOUN
fuelectenerg-6011	119	30	species	specie	NOUN
fuelectenerg-6011	119	31	.	.	PUNCT
fuelectenerg-6011	120	1	the	the	DET
fuelectenerg-6011	120	2	memory	memory	NOUN
fuelectenerg-6011	120	3	window	window	NOUN
fuelectenerg-6011	120	4	of	of	ADP
fuelectenerg-6011	120	5	the	the	DET
fuelectenerg-6011	120	6	samples	sample	NOUN
fuelectenerg-6011	120	7	with	with	ADP
fuelectenerg-6011	120	8	hfo2	hfo2	NOUN
fuelectenerg-6011	120	9	as	as	SCONJ
fuelectenerg-6011	120	10	tunnel	tunnel	NOUN
fuelectenerg-6011	120	11	dielectric	dielectric	NOUN
fuelectenerg-6011	120	12	is	be	AUX
fuelectenerg-6011	120	13	larger	large	ADJ
fuelectenerg-6011	120	14	than	than	ADP
fuelectenerg-6011	120	15	the	the	DET
fuelectenerg-6011	120	16	samples	sample	NOUN
fuelectenerg-6011	120	17	with	with	ADP
fuelectenerg-6011	120	18	sio2	sio2	PROPN
fuelectenerg-6011	120	19	due	due	ADP
fuelectenerg-6011	120	20	to	to	ADP
fuelectenerg-6011	120	21	the	the	DET
fuelectenerg-6011	120	22	smaller	small	ADJ
fuelectenerg-6011	120	23	voltage	voltage	NOUN
fuelectenerg-6011	120	24	drop	drop	NOUN
fuelectenerg-6011	120	25	with	with	ADP
fuelectenerg-6011	120	26	the	the	DET
fuelectenerg-6011	120	27	same	same	ADJ
fuelectenerg-6011	120	28	physical	physical	ADJ
fuelectenerg-6011	120	29	thickness(=3	thickness(=3	NOUN
fuelectenerg-6011	120	30	nm	nm	NOUN
fuelectenerg-6011	120	31	)	)	PUNCT
fuelectenerg-6011	120	32	.	.	PUNCT
fuelectenerg-6011	121	1	the	the	DET
fuelectenerg-6011	121	2	physical	physical	ADJ
fuelectenerg-6011	121	3	thickness	thickness	NOUN
fuelectenerg-6011	121	4	of	of	ADP
fuelectenerg-6011	121	5	hfo2	hfo2	NOUN
fuelectenerg-6011	121	6	tunnel	tunnel	NOUN
fuelectenerg-6011	121	7	oxide	oxide	NOUN
fuelectenerg-6011	121	8	is	be	AUX
fuelectenerg-6011	121	9	sufficient	sufficient	ADJ
fuelectenerg-6011	121	10	for	for	ADP
fuelectenerg-6011	121	11	the	the	DET
fuelectenerg-6011	121	12	small	small	ADJ
fuelectenerg-6011	121	13	operation	operation	NOUN
fuelectenerg-6011	121	14	voltage	voltage	NOUN
fuelectenerg-6011	121	15	but	but	CCONJ
fuelectenerg-6011	121	16	not	not	PART
fuelectenerg-6011	121	17	satisfactory	satisfactory	ADJ
fuelectenerg-6011	121	18	for	for	ADP
fuelectenerg-6011	121	19	the	the	DET
fuelectenerg-6011	121	20	retention	retention	NOUN
fuelectenerg-6011	121	21	requirement	requirement	NOUN
fuelectenerg-6011	121	22	because	because	SCONJ
fuelectenerg-6011	121	23	the	the	DET
fuelectenerg-6011	121	24	equivalent	equivalent	ADJ
fuelectenerg-6011	121	25	oxide	oxide	NOUN
fuelectenerg-6011	121	26	thickness	thickness	NOUN
fuelectenerg-6011	121	27	(	(	PUNCT
fuelectenerg-6011	121	28	1.5	1.5	NUM
fuelectenerg-6011	121	29	nm	nm	NOUN
fuelectenerg-6011	121	30	)	)	PUNCT
fuelectenerg-6011	121	31	being	be	AUX
fuelectenerg-6011	121	32	too	too	ADV
fuelectenerg-6011	121	33	thin	thin	ADJ
fuelectenerg-6011	121	34	so	so	SCONJ
fuelectenerg-6011	121	35	that	that	SCONJ
fuelectenerg-6011	121	36	the	the	DET
fuelectenerg-6011	121	37	electrons	electron	NOUN
fuelectenerg-6011	121	38	can	can	AUX
fuelectenerg-6011	121	39	tunnel	tunnel	VERB
fuelectenerg-6011	121	40	back	back	ADV
fuelectenerg-6011	121	41	easily	easily	ADV
fuelectenerg-6011	121	42	.	.	PUNCT
fuelectenerg-6011	122	1	the	the	DET
fuelectenerg-6011	122	2	tunneling	tunneling	NOUN
fuelectenerg-6011	122	3	probability	probability	NOUN
fuelectenerg-6011	122	4	of	of	ADP
fuelectenerg-6011	122	5	electron	electron	NOUN
fuelectenerg-6011	122	6	is	be	AUX
fuelectenerg-6011	122	7	interrelated	interrelate	VERB
fuelectenerg-6011	122	8	with	with	ADP
fuelectenerg-6011	122	9	the	the	DET
fuelectenerg-6011	122	10	thickness	thickness	NOUN
fuelectenerg-6011	122	11	and	and	CCONJ
fuelectenerg-6011	122	12	the	the	DET
fuelectenerg-6011	122	13	barrier	barrier	NOUN
fuelectenerg-6011	122	14	of	of	ADP
fuelectenerg-6011	122	15	the	the	DET
fuelectenerg-6011	122	16	tunnel	tunnel	NOUN
fuelectenerg-6011	122	17	dielectric	dielectric	NOUN
fuelectenerg-6011	122	18	.	.	PUNCT
fuelectenerg-6011	123	1	weihua	weihua	PROPN
fuelectenerg-6011	123	2	guan	guan	PROPN
fuelectenerg-6011	123	3	et	et	PROPN
fuelectenerg-6011	123	4	.	.	PUNCT
fuelectenerg-6011	124	1	al	al	PROPN
fuelectenerg-6011	124	2	.	.	PUNCT
fuelectenerg-6011	125	1	[	[	X
fuelectenerg-6011	125	2	32	32	NUM
fuelectenerg-6011	125	3	]	]	PUNCT
fuelectenerg-6011	125	4	in	in	ADP
fuelectenerg-6011	125	5	2007	2007	NUM
fuelectenerg-6011	125	6	proposed	propose	VERB
fuelectenerg-6011	125	7	that	that	SCONJ
fuelectenerg-6011	125	8	metal	metal	NOUN
fuelectenerg-6011	125	9	nanocrystal	nanocrystal	NOUN
fuelectenerg-6011	125	10	(	(	PUNCT
fuelectenerg-6011	125	11	mnc	mnc	PROPN
fuelectenerg-6011	125	12	)	)	PUNCT
fuelectenerg-6011	125	13	shows	show	VERB
fuelectenerg-6011	125	14	better	well	ADJ
fuelectenerg-6011	125	15	retention	retention	NOUN
fuelectenerg-6011	125	16	performance	performance	NOUN
fuelectenerg-6011	125	17	than	than	ADP
fuelectenerg-6011	125	18	snc	snc	PROPN
fuelectenerg-6011	125	19	(	(	PUNCT
fuelectenerg-6011	125	20	semiconductor	semiconductor	NOUN
fuelectenerg-6011	125	21	nanocrystals	nanocrystal	NOUN
fuelectenerg-6011	125	22	)	)	PUNCT
fuelectenerg-6011	125	23	for	for	ADP
fuelectenerg-6011	125	24	the	the	DET
fuelectenerg-6011	125	25	same	same	ADJ
fuelectenerg-6011	125	26	nanocrystal	nanocrystal	ADJ
fuelectenerg-6011	125	27	size	size	NOUN
fuelectenerg-6011	125	28	because	because	SCONJ
fuelectenerg-6011	125	29	of	of	ADP
fuelectenerg-6011	125	30	the	the	DET
fuelectenerg-6011	125	31	higher	high	ADJ
fuelectenerg-6011	125	32	electron	electron	NOUN
fuelectenerg-6011	125	33	barrier	barrier	NOUN
fuelectenerg-6011	125	34	height	height	NOUN
fuelectenerg-6011	125	35	from	from	ADP
fuelectenerg-6011	125	36	mnc	mnc	PROPN
fuelectenerg-6011	125	37	to	to	ADP
fuelectenerg-6011	125	38	the	the	DET
fuelectenerg-6011	125	39	substrate	substrate	NOUN
fuelectenerg-6011	125	40	and	and	CCONJ
fuelectenerg-6011	125	41	the	the	DET
fuelectenerg-6011	125	42	weaker	weak	ADJ
fuelectenerg-6011	125	43	quantum	quantum	ADJ
fuelectenerg-6011	125	44	confinement	confinement	ADJ
fuelectenerg-6011	125	45	effect	effect	NOUN
fuelectenerg-6011	125	46	of	of	ADP
fuelectenerg-6011	125	47	mnc	mnc	PROPN
fuelectenerg-6011	125	48	.	.	PUNCT
fuelectenerg-6011	126	1	a	a	DET
fuelectenerg-6011	126	2	tunneling	tunneling	NOUN
fuelectenerg-6011	126	3	oxide	oxide	NOUN
fuelectenerg-6011	126	4	of	of	ADP
fuelectenerg-6011	126	5	3.6	3.6	NUM
fuelectenerg-6011	126	6	nm	nm	NOUN
fuelectenerg-6011	126	7	is	be	AUX
fuelectenerg-6011	126	8	thick	thick	ADJ
fuelectenerg-6011	126	9	enough	enough	ADV
fuelectenerg-6011	126	10	to	to	PART
fuelectenerg-6011	126	11	guarantee	guarantee	VERB
fuelectenerg-6011	126	12	10	10	NUM
fuelectenerg-6011	126	13	years	year	NOUN
fuelectenerg-6011	126	14	retention	retention	NOUN
fuelectenerg-6011	126	15	for	for	ADP
fuelectenerg-6011	126	16	au	au	PROPN
fuelectenerg-6011	126	17	nanocrystal	nanocrystal	PROPN
fuelectenerg-6011	126	18	.	.	PUNCT
fuelectenerg-6011	127	1	it	it	PRON
fuelectenerg-6011	127	2	is	be	AUX
fuelectenerg-6011	127	3	also	also	ADV
fuelectenerg-6011	127	4	observed	observe	VERB
fuelectenerg-6011	127	5	that	that	SCONJ
fuelectenerg-6011	127	6	high	high	ADJ
fuelectenerg-6011	127	7	-	-	PUNCT
fuelectenerg-6011	127	8	k	k	NOUN
fuelectenerg-6011	127	9	tunneling	tunneling	NOUN
fuelectenerg-6011	127	10	barrier	barrier	NOUN
fuelectenerg-6011	127	11	combined	combine	VERB
fuelectenerg-6011	127	12	with	with	ADP
fuelectenerg-6011	127	13	high	high	ADJ
fuelectenerg-6011	127	14	work	work	NOUN
fuelectenerg-6011	127	15	function	function	NOUN
fuelectenerg-6011	127	16	mnc	mnc	PROPN
fuelectenerg-6011	127	17	(	(	PUNCT
fuelectenerg-6011	127	18	e.g.ncau	e.g.ncau	NOUN
fuelectenerg-6011	127	19	)	)	PUNCT
fuelectenerg-6011	127	20	can	can	AUX
fuelectenerg-6011	127	21	further	far	ADV
fuelectenerg-6011	127	22	enhance	enhance	VERB
fuelectenerg-6011	127	23	the	the	DET
fuelectenerg-6011	127	24	retention	retention	NOUN
fuelectenerg-6011	127	25	performance	performance	NOUN
fuelectenerg-6011	127	26	.	.	PUNCT
fuelectenerg-6011	128	1	therefore	therefore	ADV
fuelectenerg-6011	128	2	,	,	PUNCT
fuelectenerg-6011	128	3	metal	metal	NOUN
fuelectenerg-6011	128	4	nanocrystal	nanocrystal	ADJ
fuelectenerg-6011	128	5	memory	memory	NOUN
fuelectenerg-6011	128	6	devices	device	NOUN
fuelectenerg-6011	128	7	employing	employ	VERB
fuelectenerg-6011	128	8	high	high	ADJ
fuelectenerg-6011	128	9	–	–	PUNCT
fuelectenerg-6011	128	10	k	k	PROPN
fuelectenerg-6011	128	11	gate	gate	PROPN
fuelectenerg-6011	128	12	dielectric	dielectric	NOUN
fuelectenerg-6011	128	13	is	be	AUX
fuelectenerg-6011	128	14	a	a	DET
fuelectenerg-6011	128	15	promising	promising	ADJ
fuelectenerg-6011	128	16	162	162	NUM
fuelectenerg-6011	128	17	r.	r.	PROPN
fuelectenerg-6011	128	18	rajput	rajput	PROPN
fuelectenerg-6011	128	19	,	,	PUNCT
fuelectenerg-6011	128	20	r.	r.	PROPN
fuelectenerg-6011	128	21	vaid	vaid	PROPN
fuelectenerg-6011	128	22	candidate	candidate	NOUN
fuelectenerg-6011	128	23	for	for	ADP
fuelectenerg-6011	128	24	the	the	DET
fuelectenerg-6011	128	25	application	application	NOUN
fuelectenerg-6011	128	26	of	of	ADP
fuelectenerg-6011	128	27	non	non	ADJ
fuelectenerg-6011	128	28	-	-	ADJ
fuelectenerg-6011	128	29	volatile	volatile	ADJ
fuelectenerg-6011	128	30	memories	memory	NOUN
fuelectenerg-6011	128	31	.	.	PUNCT
fuelectenerg-6011	129	1	again	again	ADV
fuelectenerg-6011	129	2	,	,	PUNCT
fuelectenerg-6011	129	3	weihua	weihua	PROPN
fuelectenerg-6011	129	4	guan	guan	PROPN
fuelectenerg-6011	129	5	et	et	PROPN
fuelectenerg-6011	129	6	.	.	PUNCT
fuelectenerg-6011	130	1	al	al	PROPN
fuelectenerg-6011	130	2	.	.	PUNCT
fuelectenerg-6011	131	1	[	[	X
fuelectenerg-6011	131	2	33	33	NUM
fuelectenerg-6011	131	3	]	]	PUNCT
fuelectenerg-6011	131	4	in	in	ADP
fuelectenerg-6011	131	5	2007	2007	NUM
fuelectenerg-6011	131	6	fabricated	fabricate	VERB
fuelectenerg-6011	131	7	mos	mos	NOUN
fuelectenerg-6011	131	8	capacitor	capacitor	NOUN
fuelectenerg-6011	131	9	structure	structure	NOUN
fuelectenerg-6011	131	10	with	with	ADP
fuelectenerg-6011	131	11	metal	metal	NOUN
fuelectenerg-6011	131	12	nanocrystals	nanocrystal	NOUN
fuelectenerg-6011	131	13	(	(	PUNCT
fuelectenerg-6011	131	14	including	include	VERB
fuelectenerg-6011	131	15	au	au	PROPN
fuelectenerg-6011	131	16	,	,	PUNCT
fuelectenerg-6011	131	17	ni	ni	PROPN
fuelectenerg-6011	131	18	and	and	CCONJ
fuelectenerg-6011	131	19	co	co	AUX
fuelectenerg-6011	131	20	formed	form	VERB
fuelectenerg-6011	131	21	by	by	ADP
fuelectenerg-6011	131	22	self	self	NOUN
fuelectenerg-6011	131	23	-	-	PUNCT
fuelectenerg-6011	131	24	assembling	assemble	VERB
fuelectenerg-6011	131	25	process	process	NOUN
fuelectenerg-6011	131	26	)	)	PUNCT
fuelectenerg-6011	131	27	embedded	embed	VERB
fuelectenerg-6011	131	28	in	in	ADP
fuelectenerg-6011	131	29	the	the	DET
fuelectenerg-6011	131	30	gate	gate	NOUN
fuelectenerg-6011	131	31	oxide	oxide	NOUN
fuelectenerg-6011	131	32	for	for	ADP
fuelectenerg-6011	131	33	nonvolatile	nonvolatile	ADJ
fuelectenerg-6011	131	34	memory	memory	NOUN
fuelectenerg-6011	131	35	(	(	PUNCT
fuelectenerg-6011	131	36	nvm	nvm	NOUN
fuelectenerg-6011	131	37	)	)	PUNCT
fuelectenerg-6011	131	38	application	application	NOUN
fuelectenerg-6011	131	39	.	.	PUNCT
fuelectenerg-6011	132	1	due	due	ADP
fuelectenerg-6011	132	2	to	to	ADP
fuelectenerg-6011	132	3	high	high	ADJ
fuelectenerg-6011	132	4	work	work	NOUN
fuelectenerg-6011	132	5	function	function	NOUN
fuelectenerg-6011	132	6	(	(	PUNCT
fuelectenerg-6011	132	7	5.0	5.0	NUM
fuelectenerg-6011	132	8	ev	ev	NOUN
fuelectenerg-6011	132	9	)	)	PUNCT
fuelectenerg-6011	132	10	au	au	PROPN
fuelectenerg-6011	132	11	nanocrystals	nanocrystal	NOUN
fuelectenerg-6011	132	12	can	can	AUX
fuelectenerg-6011	132	13	provide	provide	VERB
fuelectenerg-6011	132	14	enhanced	enhanced	ADJ
fuelectenerg-6011	132	15	retention	retention	NOUN
fuelectenerg-6011	132	16	performance	performance	NOUN
fuelectenerg-6011	132	17	which	which	PRON
fuelectenerg-6011	132	18	confirms	confirm	VERB
fuelectenerg-6011	132	19	the	the	DET
fuelectenerg-6011	132	20	high	high	ADJ
fuelectenerg-6011	132	21	capacity	capacity	NOUN
fuelectenerg-6011	132	22	of	of	ADP
fuelectenerg-6011	132	23	au	au	ADJ
fuelectenerg-6011	132	24	nanocrystals	nanocrystal	NOUN
fuelectenerg-6011	132	25	for	for	ADP
fuelectenerg-6011	132	26	nvm	nvm	NOUN
fuelectenerg-6011	132	27	applications	application	NOUN
fuelectenerg-6011	132	28	with	with	ADP
fuelectenerg-6011	132	29	respect	respect	NOUN
fuelectenerg-6011	132	30	to	to	ADP
fuelectenerg-6011	132	31	semiconductor	semiconductor	NOUN
fuelectenerg-6011	132	32	counterparts	counterpart	NOUN
fuelectenerg-6011	132	33	.	.	PUNCT
fuelectenerg-6011	133	1	jaeyoung	jaeyoung	PROPN
fuelectenerg-6011	133	2	choi	choi	PROPN
fuelectenerg-6011	133	3	et	et	PROPN
fuelectenerg-6011	133	4	.	.	PUNCT
fuelectenerg-6011	134	1	al	al	PROPN
fuelectenerg-6011	134	2	.	.	PUNCT
fuelectenerg-6011	135	1	[	[	X
fuelectenerg-6011	135	2	34	34	NUM
fuelectenerg-6011	135	3	]	]	PUNCT
fuelectenerg-6011	135	4	in	in	ADP
fuelectenerg-6011	135	5	2007	2007	NUM
fuelectenerg-6011	135	6	fabricated	fabricate	VERB
fuelectenerg-6011	135	7	nonvolatile	nonvolatile	ADJ
fuelectenerg-6011	135	8	memory	memory	NOUN
fuelectenerg-6011	135	9	(	(	PUNCT
fuelectenerg-6011	135	10	nvm	nvm	NOUN
fuelectenerg-6011	135	11	)	)	PUNCT
fuelectenerg-6011	135	12	mos	mos	PROPN
fuelectenerg-6011	135	13	capacitors	capacitor	NOUN
fuelectenerg-6011	135	14	with	with	ADP
fuelectenerg-6011	135	15	a	a	DET
fuelectenerg-6011	135	16	structure	structure	NOUN
fuelectenerg-6011	135	17	of	of	ADP
fuelectenerg-6011	135	18	si	si	PROPN
fuelectenerg-6011	135	19	/	/	SYM
fuelectenerg-6011	135	20	sio2	sio2	PROPN
fuelectenerg-6011	135	21	/	/	SYM
fuelectenerg-6011	135	22	ni	ni	PROPN
fuelectenerg-6011	135	23	ncs	ncs	PROPN
fuelectenerg-6011	135	24	/	/	SYM
fuelectenerg-6011	135	25	sio2	sio2	PROPN
fuelectenerg-6011	135	26	/	/	SYM
fuelectenerg-6011	135	27	al2o3	al2o3	PROPN
fuelectenerg-6011	135	28	.	.	PUNCT
fuelectenerg-6011	136	1	the	the	DET
fuelectenerg-6011	136	2	mos	mos	PROPN
fuelectenerg-6011	136	3	memory	memory	NOUN
fuelectenerg-6011	136	4	structures	structure	NOUN
fuelectenerg-6011	136	5	with	with	ADP
fuelectenerg-6011	136	6	the	the	DET
fuelectenerg-6011	136	7	ninc	ninc	ADJ
fuelectenerg-6011	136	8	floating	float	VERB
fuelectenerg-6011	136	9	gates	gate	NOUN
fuelectenerg-6011	136	10	showed	show	VERB
fuelectenerg-6011	136	11	a	a	DET
fuelectenerg-6011	136	12	relatively	relatively	ADV
fuelectenerg-6011	136	13	large	large	ADJ
fuelectenerg-6011	136	14	memory	memory	NOUN
fuelectenerg-6011	136	15	window	window	NOUN
fuelectenerg-6011	136	16	of	of	ADP
fuelectenerg-6011	136	17	3	3	NUM
fuelectenerg-6011	136	18	–	–	SYM
fuelectenerg-6011	136	19	5	5	NUM
fuelectenerg-6011	136	20	v	v	NOUN
fuelectenerg-6011	136	21	for	for	ADP
fuelectenerg-6011	136	22	10	10	NUM
fuelectenerg-6011	136	23	ms	ms	NOUN
fuelectenerg-6011	136	24	–	–	PUNCT
fuelectenerg-6011	136	25	1	1	NUM
fuelectenerg-6011	136	26	s	s	NOUN
fuelectenerg-6011	136	27	under	under	ADP
fuelectenerg-6011	136	28	±19	±19	PROPN
fuelectenerg-6011	136	29	v	v	NOUN
fuelectenerg-6011	136	30	and	and	CCONJ
fuelectenerg-6011	136	31	excellent	excellent	ADJ
fuelectenerg-6011	136	32	endurance	endurance	NOUN
fuelectenerg-6011	136	33	characteristics	characteristic	NOUN
fuelectenerg-6011	136	34	.	.	PUNCT
fuelectenerg-6011	137	1	byoungjun	byoungjun	PROPN
fuelectenerg-6011	137	2	park	park	PROPN
fuelectenerg-6011	137	3	et	et	PROPN
fuelectenerg-6011	137	4	.	.	PUNCT
fuelectenerg-6011	138	1	al	al	PROPN
fuelectenerg-6011	138	2	.	.	PUNCT
fuelectenerg-6011	139	1	[	[	X
fuelectenerg-6011	139	2	14	14	NUM
fuelectenerg-6011	139	3	]	]	PUNCT
fuelectenerg-6011	139	4	in	in	ADP
fuelectenerg-6011	139	5	2008	2008	NUM
fuelectenerg-6011	139	6	studied	study	VERB
fuelectenerg-6011	139	7	the	the	DET
fuelectenerg-6011	139	8	electrical	electrical	ADJ
fuelectenerg-6011	139	9	characteristics	characteristic	NOUN
fuelectenerg-6011	139	10	of	of	ADP
fuelectenerg-6011	139	11	titanium	titanium	NOUN
fuelectenerg-6011	139	12	(	(	PUNCT
fuelectenerg-6011	139	13	ti	ti	NOUN
fuelectenerg-6011	139	14	)	)	PUNCT
fuelectenerg-6011	139	15	nanoparticles	nanoparticle	NOUN
fuelectenerg-6011	139	16	embedded	embed	VERB
fuelectenerg-6011	139	17	metal	metal	NOUN
fuelectenerg-6011	139	18	-	-	PUNCT
fuelectenerg-6011	139	19	oxidesemiconductor	oxidesemiconductor	NOUN
fuelectenerg-6011	139	20	(	(	PUNCT
fuelectenerg-6011	139	21	mos	mos	ADJ
fuelectenerg-6011	139	22	)	)	PUNCT
fuelectenerg-6011	139	23	capacitors	capacitor	NOUN
fuelectenerg-6011	139	24	and	and	CCONJ
fuelectenerg-6011	139	25	metal	metal	NOUN
fuelectenerg-6011	139	26	-	-	PUNCT
fuelectenerg-6011	139	27	oxide	oxide	NOUN
fuelectenerg-6011	139	28	-	-	PUNCT
fuelectenerg-6011	139	29	semiconductor	semiconductor	NOUN
fuelectenerg-6011	139	30	field	field	NOUN
fuelectenerg-6011	139	31	effect	effect	NOUN
fuelectenerg-6011	139	32	transistors	transistor	NOUN
fuelectenerg-6011	139	33	(	(	PUNCT
fuelectenerg-6011	139	34	mosfets	mosfet	NOUN
fuelectenerg-6011	139	35	)	)	PUNCT
fuelectenerg-6011	139	36	with	with	ADP
fuelectenerg-6011	139	37	blocking	block	VERB
fuelectenerg-6011	139	38	al2o3	al2o3	PROPN
fuelectenerg-6011	139	39	layer(~20	layer(~20	PROPN
fuelectenerg-6011	139	40	nm	nm	PROPN
fuelectenerg-6011	139	41	)	)	PUNCT
fuelectenerg-6011	139	42	and	and	CCONJ
fuelectenerg-6011	139	43	tunneling	tunneling	NOUN
fuelectenerg-6011	139	44	sio2	sio2	PROPN
fuelectenerg-6011	139	45	(	(	PUNCT
fuelectenerg-6011	139	46	~6.3	~6.3	X
fuelectenerg-6011	139	47	nm)layer	nm)layer	NOUN
fuelectenerg-6011	139	48	.	.	PUNCT
fuelectenerg-6011	140	1	due	due	ADP
fuelectenerg-6011	140	2	to	to	ADP
fuelectenerg-6011	140	3	work	work	NOUN
fuelectenerg-6011	140	4	function	function	NOUN
fuelectenerg-6011	140	5	of	of	ADP
fuelectenerg-6011	140	6	4.3	4.3	NUM
fuelectenerg-6011	140	7	ev	ev	PART
fuelectenerg-6011	140	8	ti	ti	NOUN
fuelectenerg-6011	140	9	nanoparticles	nanoparticle	NOUN
fuelectenerg-6011	140	10	shows	show	VERB
fuelectenerg-6011	140	11	potential	potential	NOUN
fuelectenerg-6011	140	12	for	for	ADP
fuelectenerg-6011	140	13	charge	charge	NOUN
fuelectenerg-6011	140	14	storage	storage	NOUN
fuelectenerg-6011	140	15	nodes	node	NOUN
fuelectenerg-6011	140	16	in	in	ADP
fuelectenerg-6011	140	17	floating	float	VERB
fuelectenerg-6011	140	18	gate	gate	NOUN
fuelectenerg-6011	140	19	devices	device	NOUN
fuelectenerg-6011	140	20	because	because	SCONJ
fuelectenerg-6011	140	21	during	during	ADP
fuelectenerg-6011	140	22	their	their	PRON
fuelectenerg-6011	140	23	formation	formation	NOUN
fuelectenerg-6011	140	24	their	their	PRON
fuelectenerg-6011	140	25	surfaces	surface	NOUN
fuelectenerg-6011	140	26	are	be	AUX
fuelectenerg-6011	140	27	natively	natively	ADV
fuelectenerg-6011	140	28	covered	cover	VERB
fuelectenerg-6011	140	29	with	with	ADP
fuelectenerg-6011	140	30	a	a	DET
fuelectenerg-6011	140	31	titanium	titanium	NOUN
fuelectenerg-6011	140	32	dioxide	dioxide	NOUN
fuelectenerg-6011	140	33	(	(	PUNCT
fuelectenerg-6011	140	34	tio2	tio2	NOUN
fuelectenerg-6011	140	35	)	)	PUNCT
fuelectenerg-6011	140	36	layer	layer	NOUN
fuelectenerg-6011	140	37	which	which	PRON
fuelectenerg-6011	140	38	are	be	AUX
fuelectenerg-6011	140	39	known	know	VERB
fuelectenerg-6011	140	40	as	as	ADP
fuelectenerg-6011	140	41	a	a	DET
fuelectenerg-6011	140	42	high	high	ADJ
fuelectenerg-6011	140	43	-	-	PUNCT
fuelectenerg-6011	140	44	k	k	NOUN
fuelectenerg-6011	140	45	dielectric	dielectric	ADJ
fuelectenerg-6011	140	46	material	material	NOUN
fuelectenerg-6011	140	47	(	(	PUNCT
fuelectenerg-6011	140	48	ε	ε	PROPN
fuelectenerg-6011	140	49	=	=	SYM
fuelectenerg-6011	140	50	80~110	80~110	NUM
fuelectenerg-6011	140	51	)	)	PUNCT
fuelectenerg-6011	140	52	and	and	CCONJ
fuelectenerg-6011	140	53	it	it	PRON
fuelectenerg-6011	140	54	can	can	AUX
fuelectenerg-6011	140	55	avert	avert	VERB
fuelectenerg-6011	140	56	the	the	DET
fuelectenerg-6011	140	57	lateral	lateral	ADJ
fuelectenerg-6011	140	58	transportation	transportation	NOUN
fuelectenerg-6011	140	59	of	of	ADP
fuelectenerg-6011	140	60	charge	charge	NOUN
fuelectenerg-6011	140	61	carriers	carrier	NOUN
fuelectenerg-6011	140	62	between	between	ADP
fuelectenerg-6011	140	63	the	the	DET
fuelectenerg-6011	140	64	ti	ti	NOUN
fuelectenerg-6011	140	65	nanoparticles	nanoparticle	NOUN
fuelectenerg-6011	140	66	and	and	CCONJ
fuelectenerg-6011	140	67	blocking	block	VERB
fuelectenerg-6011	140	68	oxide	oxide	NOUN
fuelectenerg-6011	140	69	layers	layer	NOUN
fuelectenerg-6011	140	70	and	and	CCONJ
fuelectenerg-6011	140	71	the	the	DET
fuelectenerg-6011	140	72	charge	charge	NOUN
fuelectenerg-6011	140	73	loss	loss	NOUN
fuelectenerg-6011	140	74	through	through	ADP
fuelectenerg-6011	140	75	the	the	DET
fuelectenerg-6011	140	76	tunneling	tunneling	NOUN
fuelectenerg-6011	140	77	barrier	barrier	NOUN
fuelectenerg-6011	140	78	.	.	PUNCT
fuelectenerg-6011	141	1	yingtao	yingtao	PROPN
fuelectenerg-6011	141	2	li	li	PROPN
fuelectenerg-6011	141	3	and	and	CCONJ
fuelectenerg-6011	141	4	su	su	PROPN
fuelectenerg-6011	141	5	liu	liu	PROPN
fuelectenerg-6011	142	1	[	[	X
fuelectenerg-6011	142	2	35	35	NUM
fuelectenerg-6011	142	3	]	]	X
fuelectenerg-6011	142	4	in	in	ADP
fuelectenerg-6011	142	5	2009	2009	NUM
fuelectenerg-6011	142	6	used	use	VERB
fuelectenerg-6011	142	7	the	the	DET
fuelectenerg-6011	142	8	different	different	ADJ
fuelectenerg-6011	142	9	work	work	NOUN
fuelectenerg-6011	142	10	function	function	NOUN
fuelectenerg-6011	142	11	nc	nc	PROPN
fuelectenerg-6011	142	12	materials	material	NOUN
fuelectenerg-6011	142	13	(	(	PUNCT
fuelectenerg-6011	142	14	au~5.0ev	au~5.0ev	X
fuelectenerg-6011	142	15	,	,	PUNCT
fuelectenerg-6011	142	16	w~4.6ev	w~4.6ev	ADV
fuelectenerg-6011	142	17	and	and	CCONJ
fuelectenerg-6011	142	18	si~4.05ev	si~4.05ev	NUM
fuelectenerg-6011	142	19	)	)	PUNCT
fuelectenerg-6011	142	20	in	in	ADP
fuelectenerg-6011	142	21	nvm	nvm	NOUN
fuelectenerg-6011	142	22	devices	device	NOUN
fuelectenerg-6011	142	23	and	and	CCONJ
fuelectenerg-6011	142	24	observed	observe	VERB
fuelectenerg-6011	142	25	that	that	SCONJ
fuelectenerg-6011	142	26	au	au	PROPN
fuelectenerg-6011	142	27	-	-	PUNCT
fuelectenerg-6011	142	28	nc	nc	PROPN
fuelectenerg-6011	142	29	as	as	SCONJ
fuelectenerg-6011	142	30	floating	float	VERB
fuelectenerg-6011	142	31	gates	gate	NOUN
fuelectenerg-6011	142	32	exhibit	exhibit	VERB
fuelectenerg-6011	142	33	better	well	ADJ
fuelectenerg-6011	142	34	retention	retention	NOUN
fuelectenerg-6011	142	35	characteristics	characteristic	NOUN
fuelectenerg-6011	142	36	due	due	ADP
fuelectenerg-6011	142	37	to	to	ADP
fuelectenerg-6011	142	38	its	its	PRON
fuelectenerg-6011	142	39	larger	large	ADJ
fuelectenerg-6011	142	40	work	work	NOUN
fuelectenerg-6011	142	41	function	function	NOUN
fuelectenerg-6011	142	42	which	which	PRON
fuelectenerg-6011	142	43	induces	induce	VERB
fuelectenerg-6011	142	44	a	a	DET
fuelectenerg-6011	142	45	higher	high	ADJ
fuelectenerg-6011	142	46	barrier	barrier	NOUN
fuelectenerg-6011	142	47	height	height	NOUN
fuelectenerg-6011	142	48	and	and	CCONJ
fuelectenerg-6011	142	49	a	a	DET
fuelectenerg-6011	142	50	deeper	deep	ADJ
fuelectenerg-6011	142	51	well	well	NOUN
fuelectenerg-6011	142	52	at	at	ADP
fuelectenerg-6011	142	53	the	the	DET
fuelectenerg-6011	142	54	interface	interface	NOUN
fuelectenerg-6011	142	55	of	of	ADP
fuelectenerg-6011	142	56	the	the	DET
fuelectenerg-6011	142	57	floating	float	VERB
fuelectenerg-6011	142	58	gate	gate	NOUN
fuelectenerg-6011	142	59	and	and	CCONJ
fuelectenerg-6011	142	60	the	the	DET
fuelectenerg-6011	142	61	tunneling	tunneling	NOUN
fuelectenerg-6011	142	62	dielectric	dielectric	NOUN
fuelectenerg-6011	142	63	.	.	PUNCT
fuelectenerg-6011	143	1	the	the	DET
fuelectenerg-6011	143	2	work	work	NOUN
fuelectenerg-6011	143	3	function	function	NOUN
fuelectenerg-6011	143	4	values	value	NOUN
fuelectenerg-6011	143	5	for	for	ADP
fuelectenerg-6011	143	6	some	some	DET
fuelectenerg-6011	143	7	important	important	ADJ
fuelectenerg-6011	143	8	transition	transition	NOUN
fuelectenerg-6011	143	9	metals	metal	NOUN
fuelectenerg-6011	143	10	are	be	AUX
fuelectenerg-6011	143	11	listed	list	VERB
fuelectenerg-6011	143	12	in	in	ADP
fuelectenerg-6011	143	13	table	table	NOUN
fuelectenerg-6011	143	14	3	3	NUM
fuelectenerg-6011	143	15	.	.	PUNCT
fuelectenerg-6011	143	16	ni	ni	PROPN
fuelectenerg-6011	143	17	henan	henan	PROPN
fuelectenerg-6011	143	18	et	et	PROPN
fuelectenerg-6011	143	19	.	.	PUNCT
fuelectenerg-6011	144	1	al	al	PROPN
fuelectenerg-6011	144	2	.	.	PUNCT
fuelectenerg-6011	145	1	[	[	X
fuelectenerg-6011	145	2	36	36	NUM
fuelectenerg-6011	145	3	]	]	PUNCT
fuelectenerg-6011	145	4	in	in	ADP
fuelectenerg-6011	145	5	2009	2009	NUM
fuelectenerg-6011	145	6	fabricated	fabricate	VERB
fuelectenerg-6011	145	7	and	and	CCONJ
fuelectenerg-6011	145	8	characterized	characterize	VERB
fuelectenerg-6011	145	9	the	the	DET
fuelectenerg-6011	145	10	mos	mos	PROPN
fuelectenerg-6011	145	11	structure	structure	NOUN
fuelectenerg-6011	145	12	with	with	ADP
fuelectenerg-6011	145	13	double	double	ADJ
fuelectenerg-6011	145	14	-	-	PUNCT
fuelectenerg-6011	145	15	layer	layer	NOUN
fuelectenerg-6011	145	16	heterogeneous	heterogeneous	ADJ
fuelectenerg-6011	145	17	nanocrystals	nanocrystal	NOUN
fuelectenerg-6011	145	18	(	(	PUNCT
fuelectenerg-6011	145	19	si	si	X
fuelectenerg-6011	145	20	nanocrystals	nanocrystal	NOUN
fuelectenerg-6011	145	21	and	and	CCONJ
fuelectenerg-6011	145	22	ni	ni	PROPN
fuelectenerg-6011	145	23	nanocrystals	nanocrystal	NOUN
fuelectenerg-6011	145	24	)	)	PUNCT
fuelectenerg-6011	145	25	embedded	embed	VERB
fuelectenerg-6011	145	26	in	in	ADP
fuelectenerg-6011	145	27	a	a	DET
fuelectenerg-6011	145	28	gate	gate	NOUN
fuelectenerg-6011	145	29	oxide	oxide	NOUN
fuelectenerg-6011	145	30	(	(	PUNCT
fuelectenerg-6011	145	31	sio2	sio2	PROPN
fuelectenerg-6011	145	32	)	)	PUNCT
fuelectenerg-6011	145	33	matrix	matrix	NOUN
fuelectenerg-6011	145	34	for	for	ADP
fuelectenerg-6011	145	35	nonvolatile	nonvolatile	NOUN
fuelectenerg-6011	145	36	memory	memory	NOUN
fuelectenerg-6011	145	37	applications	application	NOUN
fuelectenerg-6011	145	38	.	.	PUNCT
fuelectenerg-6011	146	1	the	the	DET
fuelectenerg-6011	146	2	additional	additional	ADJ
fuelectenerg-6011	146	3	metal	metal	NOUN
fuelectenerg-6011	146	4	nanocrystals	nanocrystal	NOUN
fuelectenerg-6011	146	5	layer	layer	NOUN
fuelectenerg-6011	146	6	allows	allow	VERB
fuelectenerg-6011	146	7	the	the	DET
fuelectenerg-6011	146	8	direct	direct	ADJ
fuelectenerg-6011	146	9	tunneling	tunneling	NOUN
fuelectenerg-6011	146	10	mechanism	mechanism	NOUN
fuelectenerg-6011	146	11	to	to	PART
fuelectenerg-6011	146	12	raise	raise	VERB
fuelectenerg-6011	146	13	the	the	DET
fuelectenerg-6011	146	14	flat	flat	ADJ
fuelectenerg-6011	146	15	voltage	voltage	NOUN
fuelectenerg-6011	146	16	shift	shift	NOUN
fuelectenerg-6011	146	17	and	and	CCONJ
fuelectenerg-6011	146	18	prolong	prolong	VERB
fuelectenerg-6011	146	19	the	the	DET
fuelectenerg-6011	146	20	retention	retention	NOUN
fuelectenerg-6011	146	21	time	time	NOUN
fuelectenerg-6011	146	22	.	.	PUNCT
fuelectenerg-6011	147	1	coulomb	coulomb	NOUN
fuelectenerg-6011	147	2	blockade	blockade	NOUN
fuelectenerg-6011	147	3	and	and	CCONJ
fuelectenerg-6011	147	4	energy	energy	NOUN
fuelectenerg-6011	147	5	level	level	NOUN
fuelectenerg-6011	147	6	quantization	quantization	NOUN
fuelectenerg-6011	147	7	limits	limit	VERB
fuelectenerg-6011	147	8	the	the	DET
fuelectenerg-6011	147	9	leakage	leakage	NOUN
fuelectenerg-6011	147	10	mechanism	mechanism	NOUN
fuelectenerg-6011	147	11	that	that	PRON
fuelectenerg-6011	147	12	is	be	AUX
fuelectenerg-6011	147	13	tunneling	tunnel	VERB
fuelectenerg-6011	147	14	to	to	ADP
fuelectenerg-6011	147	15	the	the	DET
fuelectenerg-6011	147	16	closest	close	ADV
fuelectenerg-6011	147	17	lower	low	ADJ
fuelectenerg-6011	147	18	nanocrystals	nanocrystal	NOUN
fuelectenerg-6011	147	19	[	[	X
fuelectenerg-6011	147	20	37	37	NUM
fuelectenerg-6011	147	21	]	]	PUNCT
fuelectenerg-6011	147	22	.	.	PUNCT
fuelectenerg-6011	148	1	zs	zs	PROPN
fuelectenerg-6011	148	2	.	.	PUNCT
fuelectenerg-6011	148	3	j.	j.	PROPN
fuelectenerg-6011	148	4	horvath	horvath	PROPN
fuelectenerg-6011	148	5	and	and	CCONJ
fuelectenerg-6011	148	6	p.	p.	PROPN
fuelectenerg-6011	148	7	basa	basa	PROPN
fuelectenerg-6011	149	1	[	[	X
fuelectenerg-6011	149	2	38	38	NUM
fuelectenerg-6011	149	3	]	]	PUNCT
fuelectenerg-6011	149	4	in	in	ADP
fuelectenerg-6011	149	5	2009	2009	NUM
fuelectenerg-6011	149	6	created	create	VERB
fuelectenerg-6011	149	7	mnos	mno	NOUN
fuelectenerg-6011	149	8	structures	structure	NOUN
fuelectenerg-6011	149	9	with	with	ADP
fuelectenerg-6011	149	10	semiconductor	semiconductor	NOUN
fuelectenerg-6011	149	11	nanocrystals	nanocrystal	NOUN
fuelectenerg-6011	149	12	at	at	ADP
fuelectenerg-6011	149	13	the	the	DET
fuelectenerg-6011	149	14	si3n4	si3n4	PROPN
fuelectenerg-6011	149	15	/	/	SYM
fuelectenerg-6011	149	16	sio2	sio2	PROPN
fuelectenerg-6011	149	17	interface	interface	NOUN
fuelectenerg-6011	149	18	and	and	CCONJ
fuelectenerg-6011	149	19	summarized	summarize	VERB
fuelectenerg-6011	149	20	that	that	SCONJ
fuelectenerg-6011	149	21	the	the	DET
fuelectenerg-6011	149	22	formation	formation	NOUN
fuelectenerg-6011	149	23	of	of	ADP
fuelectenerg-6011	149	24	nanocrystals	nanocrystal	NOUN
fuelectenerg-6011	149	25	in	in	ADP
fuelectenerg-6011	149	26	nitride	nitride	NOUN
fuelectenerg-6011	149	27	based	base	VERB
fuelectenerg-6011	149	28	memory	memory	NOUN
fuelectenerg-6011	149	29	structures	structure	NOUN
fuelectenerg-6011	149	30	can	can	AUX
fuelectenerg-6011	149	31	enhance	enhance	VERB
fuelectenerg-6011	149	32	both	both	CCONJ
fuelectenerg-6011	149	33	the	the	DET
fuelectenerg-6011	149	34	charging	charging	NOUN
fuelectenerg-6011	149	35	and	and	CCONJ
fuelectenerg-6011	149	36	retention	retention	NOUN
fuelectenerg-6011	149	37	behaviour	behaviour	NOUN
fuelectenerg-6011	149	38	due	due	ADP
fuelectenerg-6011	149	39	to	to	ADP
fuelectenerg-6011	149	40	direct	direct	VERB
fuelectenerg-6011	149	41	tunneling	tunneling	NOUN
fuelectenerg-6011	149	42	to	to	ADP
fuelectenerg-6011	149	43	nanocrystals	nanocrystal	NOUN
fuelectenerg-6011	149	44	and	and	CCONJ
fuelectenerg-6011	149	45	creating	create	VERB
fuelectenerg-6011	149	46	deep	deep	ADJ
fuelectenerg-6011	149	47	energy	energy	NOUN
fuelectenerg-6011	149	48	states	state	NOUN
fuelectenerg-6011	149	49	respectively	respectively	ADV
fuelectenerg-6011	149	50	[	[	X
fuelectenerg-6011	149	51	39,40	39,40	NUM
fuelectenerg-6011	149	52	]	]	PUNCT
fuelectenerg-6011	149	53	.	.	PUNCT
fuelectenerg-6011	150	1	jeng	jeng	PROPN
fuelectenerg-6011	150	2	hwa	hwa	PROPN
fuelectenerg-6011	150	3	liao	liao	PROPN
fuelectenerg-6011	150	4	et	et	PROPN
fuelectenerg-6011	150	5	.	.	PUNCT
fuelectenerg-6011	151	1	al	al	PROPN
fuelectenerg-6011	151	2	.	.	PUNCT
fuelectenerg-6011	152	1	[	[	X
fuelectenerg-6011	152	2	41	41	NUM
fuelectenerg-6011	152	3	]	]	PUNCT
fuelectenerg-6011	152	4	investigated	investigate	VERB
fuelectenerg-6011	152	5	the	the	DET
fuelectenerg-6011	152	6	relationship	relationship	NOUN
fuelectenerg-6011	152	7	between	between	ADP
fuelectenerg-6011	152	8	the	the	DET
fuelectenerg-6011	152	9	physical	physical	ADJ
fuelectenerg-6011	152	10	and	and	CCONJ
fuelectenerg-6011	152	11	the	the	DET
fuelectenerg-6011	152	12	electrical	electrical	ADJ
fuelectenerg-6011	152	13	characteristics	characteristic	NOUN
fuelectenerg-6011	152	14	of	of	ADP
fuelectenerg-6011	152	15	silicon	silicon	NOUN
fuelectenerg-6011	152	16	oxynitride	oxynitride	ADJ
fuelectenerg-6011	152	17	(	(	PUNCT
fuelectenerg-6011	152	18	sion	sion	NOUN
fuelectenerg-6011	152	19	)	)	PUNCT
fuelectenerg-6011	152	20	films	film	NOUN
fuelectenerg-6011	152	21	and	and	CCONJ
fuelectenerg-6011	152	22	the	the	DET
fuelectenerg-6011	152	23	refractive	refractive	ADJ
fuelectenerg-6011	152	24	index	index	NOUN
fuelectenerg-6011	152	25	.	.	PUNCT
fuelectenerg-6011	153	1	it	it	PRON
fuelectenerg-6011	153	2	was	be	AUX
fuelectenerg-6011	153	3	found	find	VERB
fuelectenerg-6011	153	4	that	that	SCONJ
fuelectenerg-6011	153	5	the	the	DET
fuelectenerg-6011	153	6	charge	charge	NOUN
fuelectenerg-6011	153	7	-	-	PUNCT
fuelectenerg-6011	153	8	trap	trap	NOUN
fuelectenerg-6011	153	9	density	density	NOUN
fuelectenerg-6011	153	10	of	of	ADP
fuelectenerg-6011	153	11	the	the	DET
fuelectenerg-6011	153	12	sion	sion	NOUN
fuelectenerg-6011	153	13	film	film	NOUN
fuelectenerg-6011	153	14	is	be	AUX
fuelectenerg-6011	153	15	inversely	inversely	ADV
fuelectenerg-6011	153	16	proportional	proportional	ADJ
fuelectenerg-6011	153	17	to	to	ADP
fuelectenerg-6011	153	18	the	the	DET
fuelectenerg-6011	153	19	oxygen	oxygen	NOUN
fuelectenerg-6011	153	20	concentration	concentration	NOUN
fuelectenerg-6011	153	21	in	in	ADP
fuelectenerg-6011	153	22	the	the	DET
fuelectenerg-6011	153	23	sion	sion	NOUN
fuelectenerg-6011	153	24	layers	layer	NOUN
fuelectenerg-6011	153	25	and	and	CCONJ
fuelectenerg-6011	153	26	the	the	DET
fuelectenerg-6011	153	27	dielectric	dielectric	ADJ
fuelectenerg-6011	153	28	constant	constant	NOUN
fuelectenerg-6011	153	29	is	be	AUX
fuelectenerg-6011	153	30	directly	directly	ADV
fuelectenerg-6011	153	31	proportional	proportional	ADJ
fuelectenerg-6011	153	32	to	to	ADP
fuelectenerg-6011	153	33	the	the	DET
fuelectenerg-6011	153	34	refractive	refractive	ADJ
fuelectenerg-6011	153	35	index	index	NOUN
fuelectenerg-6011	153	36	.	.	PUNCT
fuelectenerg-6011	154	1	s.	s.	PROPN
fuelectenerg-6011	154	2	raghunathan	raghunathan	PROPN
fuelectenerg-6011	154	3	et	et	PROPN
fuelectenerg-6011	154	4	.	.	PUNCT
fuelectenerg-6011	155	1	al	al	PROPN
fuelectenerg-6011	155	2	.	.	PUNCT
fuelectenerg-6011	156	1	[	[	X
fuelectenerg-6011	156	2	11	11	NUM
fuelectenerg-6011	156	3	]	]	PUNCT
fuelectenerg-6011	156	4	in	in	ADP
fuelectenerg-6011	156	5	2009	2009	NUM
fuelectenerg-6011	156	6	investigated	investigate	VERB
fuelectenerg-6011	156	7	that	that	SCONJ
fuelectenerg-6011	156	8	during	during	ADP
fuelectenerg-6011	156	9	programming	program	VERB
fuelectenerg-6011	156	10	ultra	ultra	ADJ
fuelectenerg-6011	156	11	-	-	ADJ
fuelectenerg-6011	156	12	thin	thin	ADJ
fuelectenerg-6011	156	13	metal	metal	NOUN
fuelectenerg-6011	156	14	fg	fg	NOUN
fuelectenerg-6011	156	15	shown	show	VERB
fuelectenerg-6011	156	16	three	three	NUM
fuelectenerg-6011	156	17	orders	order	NOUN
fuelectenerg-6011	156	18	of	of	ADP
fuelectenerg-6011	156	19	magnitude	magnitude	NOUN
fuelectenerg-6011	156	20	lesser	less	ADJ
fuelectenerg-6011	156	21	ballistic	ballistic	ADJ
fuelectenerg-6011	156	22	current	current	NOUN
fuelectenerg-6011	156	23	than	than	ADP
fuelectenerg-6011	156	24	poly	poly	ADJ
fuelectenerg-6011	156	25	-	-	PUNCT
fuelectenerg-6011	156	26	si	si	NOUN
fuelectenerg-6011	156	27	of	of	ADP
fuelectenerg-6011	156	28	same	same	ADJ
fuelectenerg-6011	156	29	thickness	thickness	NOUN
fuelectenerg-6011	156	30	because	because	SCONJ
fuelectenerg-6011	156	31	the	the	DET
fuelectenerg-6011	156	32	metal	metal	NOUN
fuelectenerg-6011	156	33	has	have	VERB
fuelectenerg-6011	156	34	high	high	ADJ
fuelectenerg-6011	156	35	density	density	NOUN
fuelectenerg-6011	156	36	of	of	ADP
fuelectenerg-6011	156	37	states	state	NOUN
fuelectenerg-6011	156	38	and	and	CCONJ
fuelectenerg-6011	156	39	larger	large	ADJ
fuelectenerg-6011	156	40	the	the	DET
fuelectenerg-6011	156	41	density	density	NOUN
fuelectenerg-6011	156	42	of	of	ADP
fuelectenerg-6011	156	43	states	state	NOUN
fuelectenerg-6011	156	44	the	the	DET
fuelectenerg-6011	156	45	larger	large	ADJ
fuelectenerg-6011	156	46	is	be	AUX
fuelectenerg-6011	156	47	the	the	DET
fuelectenerg-6011	156	48	scattering	scattering	NOUN
fuelectenerg-6011	156	49	.	.	PUNCT
fuelectenerg-6011	157	1	it	it	PRON
fuelectenerg-6011	157	2	was	be	AUX
fuelectenerg-6011	157	3	also	also	ADV
fuelectenerg-6011	157	4	observed	observe	VERB
fuelectenerg-6011	157	5	that	that	SCONJ
fuelectenerg-6011	157	6	the	the	DET
fuelectenerg-6011	157	7	deeper	deep	ADJ
fuelectenerg-6011	157	8	work	work	NOUN
fuelectenerg-6011	157	9	-	-	PUNCT
fuelectenerg-6011	157	10	function	function	NOUN
fuelectenerg-6011	157	11	metal	metal	NOUN
fuelectenerg-6011	157	12	fg	fg	NOUN
fuelectenerg-6011	157	13	device	device	NOUN
fuelectenerg-6011	157	14	erases	erase	VERB
fuelectenerg-6011	157	15	slower	slow	ADJ
fuelectenerg-6011	157	16	but	but	CCONJ
fuelectenerg-6011	157	17	shows	show	VERB
fuelectenerg-6011	157	18	better	well	ADJ
fuelectenerg-6011	157	19	retention	retention	NOUN
fuelectenerg-6011	157	20	compared	compare	VERB
fuelectenerg-6011	157	21	to	to	ADP
fuelectenerg-6011	157	22	a	a	DET
fuelectenerg-6011	157	23	shallower	shallower	NOUN
fuelectenerg-6011	157	24	work	work	NOUN
fuelectenerg-6011	157	25	-	-	PUNCT
fuelectenerg-6011	157	26	function	function	NOUN
fuelectenerg-6011	157	27	fg	fg	PROPN
fuelectenerg-6011	157	28	device	device	NOUN
fuelectenerg-6011	157	29	.	.	PUNCT
fuelectenerg-6011	158	1	srikant	srikant	PROPN
fuelectenerg-6011	158	2	jayanti	jayanti	PROPN
fuelectenerg-6011	158	3	et	et	PROPN
fuelectenerg-6011	158	4	.	.	PUNCT
fuelectenerg-6011	159	1	al	al	PROPN
fuelectenerg-6011	159	2	.	.	PUNCT
fuelectenerg-6011	160	1	[	[	X
fuelectenerg-6011	160	2	12	12	NUM
fuelectenerg-6011	160	3	]	]	PUNCT
fuelectenerg-6011	160	4	in	in	ADP
fuelectenerg-6011	160	5	2010	2010	NUM
fuelectenerg-6011	160	6	investigated	investigate	VERB
fuelectenerg-6011	160	7	ultrathin	ultrathin	ADJ
fuelectenerg-6011	160	8	tan	tan	PROPN
fuelectenerg-6011	160	9	metal	metal	NOUN
fuelectenerg-6011	160	10	floating	float	VERB
fuelectenerg-6011	160	11	gate	gate	NOUN
fuelectenerg-6011	160	12	with	with	ADP
fuelectenerg-6011	160	13	hf	hf	PROPN
fuelectenerg-6011	160	14	based	base	VERB
fuelectenerg-6011	160	15	high	high	ADJ
fuelectenerg-6011	160	16	-	-	PUNCT
fuelectenerg-6011	160	17	k	k	PROPN
fuelectenerg-6011	160	18	ipd	ipd	PROPN
fuelectenerg-6011	160	19	for	for	ADP
fuelectenerg-6011	160	20	nand	nand	NOUN
fuelectenerg-6011	160	21	flash	flash	NOUN
fuelectenerg-6011	160	22	applications	application	NOUN
fuelectenerg-6011	160	23	.	.	PUNCT
fuelectenerg-6011	161	1	the	the	DET
fuelectenerg-6011	161	2	results	result	NOUN
fuelectenerg-6011	161	3	indicate	indicate	VERB
fuelectenerg-6011	161	4	that	that	SCONJ
fuelectenerg-6011	161	5	high	high	ADJ
fuelectenerg-6011	161	6	-	-	PUNCT
fuelectenerg-6011	161	7	k	k	NOUN
fuelectenerg-6011	161	8	based	base	VERB
fuelectenerg-6011	161	9	interpoly	interpoly	ADJ
fuelectenerg-6011	161	10	dielectric	dielectric	NOUN
fuelectenerg-6011	161	11	in	in	ADP
fuelectenerg-6011	161	12	combination	combination	NOUN
fuelectenerg-6011	161	13	with	with	ADP
fuelectenerg-6011	161	14	ultra	ultra	ADJ
fuelectenerg-6011	161	15	-	-	ADJ
fuelectenerg-6011	161	16	thin	thin	ADJ
fuelectenerg-6011	161	17	tan	tan	ADJ
fuelectenerg-6011	161	18	metal	metal	NOUN
fuelectenerg-6011	161	19	fg	fg	NOUN
fuelectenerg-6011	161	20	can	can	AUX
fuelectenerg-6011	161	21	enable	enable	VERB
fuelectenerg-6011	161	22	further	further	ADJ
fuelectenerg-6011	161	23	scaling	scaling	NOUN
fuelectenerg-6011	161	24	of	of	ADP
fuelectenerg-6011	161	25	nand	nand	NOUN
fuelectenerg-6011	161	26	flash	flash	NOUN
fuelectenerg-6011	161	27	memory	memory	NOUN
fuelectenerg-6011	161	28	beyond	beyond	ADP
fuelectenerg-6011	161	29	flash	flash	NOUN
fuelectenerg-6011	161	30	memory	memory	NOUN
fuelectenerg-6011	161	31	devices	device	NOUN
fuelectenerg-6011	161	32	with	with	ADP
fuelectenerg-6011	161	33	metal	metal	NOUN
fuelectenerg-6011	161	34	floating	float	VERB
fuelectenerg-6011	161	35	gate	gate	NOUN
fuelectenerg-6011	161	36	/	/	SYM
fuelectenerg-6011	161	37	metal	metal	NOUN
fuelectenerg-6011	161	38	nanocrystals	nanocrystal	NOUN
fuelectenerg-6011	161	39	as	as	SCONJ
fuelectenerg-6011	161	40	the	the	DET
fuelectenerg-6011	161	41	charge	charge	NOUN
fuelectenerg-6011	161	42	storage	storage	NOUN
fuelectenerg-6011	161	43	layer	layer	NOUN
fuelectenerg-6011	161	44	163	163	NUM
fuelectenerg-6011	161	45	conventional	conventional	ADJ
fuelectenerg-6011	161	46	oxide	oxide	NOUN
fuelectenerg-6011	161	47	-	-	PUNCT
fuelectenerg-6011	161	48	nitride	nitride	NOUN
fuelectenerg-6011	161	49	-	-	PUNCT
fuelectenerg-6011	161	50	oxide	oxide	NOUN
fuelectenerg-6011	161	51	(	(	PUNCT
fuelectenerg-6011	161	52	ono	ono	PROPN
fuelectenerg-6011	161	53	)	)	PUNCT
fuelectenerg-6011	161	54	based	base	VERB
fuelectenerg-6011	161	55	ipd	ipd	PROPN
fuelectenerg-6011	161	56	technology	technology	PROPN
fuelectenerg-6011	161	57	.	.	PUNCT
fuelectenerg-6011	162	1	jang	jang	PROPN
fuelectenerg-6011	162	2	-	-	PUNCT
fuelectenerg-6011	162	3	sik	sik	PROPN
fuelectenerg-6011	162	4	lee	lee	PROPN
fuelectenerg-6011	163	1	[	[	X
fuelectenerg-6011	163	2	42	42	NUM
fuelectenerg-6011	163	3	]	]	PUNCT
fuelectenerg-6011	163	4	in	in	ADP
fuelectenerg-6011	163	5	2010	2010	NUM
fuelectenerg-6011	163	6	reviewed	review	VERB
fuelectenerg-6011	163	7	gold	gold	NOUN
fuelectenerg-6011	163	8	nanoparticles	nanoparticle	NOUN
fuelectenerg-6011	163	9	are	be	AUX
fuelectenerg-6011	163	10	chemically	chemically	ADV
fuelectenerg-6011	163	11	stable	stable	ADJ
fuelectenerg-6011	163	12	and	and	CCONJ
fuelectenerg-6011	163	13	have	have	VERB
fuelectenerg-6011	163	14	a	a	DET
fuelectenerg-6011	163	15	high	high	ADJ
fuelectenerg-6011	163	16	work	work	NOUN
fuelectenerg-6011	163	17	function	function	NOUN
fuelectenerg-6011	163	18	,	,	PUNCT
fuelectenerg-6011	163	19	they	they	PRON
fuelectenerg-6011	163	20	have	have	AUX
fuelectenerg-6011	163	21	been	be	AUX
fuelectenerg-6011	163	22	shown	show	VERB
fuelectenerg-6011	163	23	to	to	PART
fuelectenerg-6011	163	24	be	be	AUX
fuelectenerg-6011	163	25	a	a	DET
fuelectenerg-6011	163	26	promising	promising	ADJ
fuelectenerg-6011	163	27	candidate	candidate	NOUN
fuelectenerg-6011	163	28	for	for	ADP
fuelectenerg-6011	163	29	use	use	NOUN
fuelectenerg-6011	163	30	as	as	ADP
fuelectenerg-6011	163	31	the	the	DET
fuelectenerg-6011	163	32	charge	charge	NOUN
fuelectenerg-6011	163	33	trapping	trap	VERB
fuelectenerg-6011	163	34	element	element	NOUN
fuelectenerg-6011	163	35	in	in	ADP
fuelectenerg-6011	163	36	non	non	ADJ
fuelectenerg-6011	163	37	-	-	ADJ
fuelectenerg-6011	163	38	volatile	volatile	ADJ
fuelectenerg-6011	163	39	memory	memory	NOUN
fuelectenerg-6011	163	40	devices	device	NOUN
fuelectenerg-6011	163	41	employing	employ	VERB
fuelectenerg-6011	163	42	nanoparticles	nanoparticle	NOUN
fuelectenerg-6011	163	43	.	.	PUNCT
fuelectenerg-6011	164	1	shiqian	shiqian	PROPN
fuelectenerg-6011	164	2	yang	yang	PROPN
fuelectenerg-6011	164	3	et	et	PROPN
fuelectenerg-6011	164	4	.	.	PUNCT
fuelectenerg-6011	165	1	al	al	PROPN
fuelectenerg-6011	165	2	.	.	PUNCT
fuelectenerg-6011	166	1	[	[	X
fuelectenerg-6011	166	2	43	43	NUM
fuelectenerg-6011	166	3	]	]	PUNCT
fuelectenerg-6011	166	4	in	in	ADP
fuelectenerg-6011	166	5	2010	2010	NUM
fuelectenerg-6011	166	6	fabricated	fabricate	VERB
fuelectenerg-6011	166	7	mos	mos	NOUN
fuelectenerg-6011	166	8	capacitor	capacitor	NOUN
fuelectenerg-6011	166	9	(	(	PUNCT
fuelectenerg-6011	166	10	p	p	NOUN
fuelectenerg-6011	166	11	-	-	PUNCT
fuelectenerg-6011	166	12	si	si	NOUN
fuelectenerg-6011	166	13	/	/	SYM
fuelectenerg-6011	166	14	sio2	sio2	PROPN
fuelectenerg-6011	166	15	/	/	SYM
fuelectenerg-6011	166	16	tiw	tiw	NOUN
fuelectenerg-6011	166	17	ncs	ncs	PROPN
fuelectenerg-6011	166	18	/	/	SYM
fuelectenerg-6011	166	19	al2o3	al2o3	PROPN
fuelectenerg-6011	166	20	/	/	SYM
fuelectenerg-6011	166	21	al	al	PROPN
fuelectenerg-6011	166	22	)	)	PUNCT
fuelectenerg-6011	166	23	and	and	CCONJ
fuelectenerg-6011	166	24	illustrate	illustrate	VERB
fuelectenerg-6011	166	25	that	that	DET
fuelectenerg-6011	166	26	high	high	ADJ
fuelectenerg-6011	166	27	-	-	PUNCT
fuelectenerg-6011	166	28	k	k	NOUN
fuelectenerg-6011	166	29	blocking	block	VERB
fuelectenerg-6011	166	30	oxide	oxide	NOUN
fuelectenerg-6011	166	31	play	play	VERB
fuelectenerg-6011	166	32	vital	vital	ADJ
fuelectenerg-6011	166	33	role	role	NOUN
fuelectenerg-6011	166	34	in	in	ADP
fuelectenerg-6011	166	35	the	the	DET
fuelectenerg-6011	166	36	low	low	ADJ
fuelectenerg-6011	166	37	-	-	PUNCT
fuelectenerg-6011	166	38	voltage	voltage	NOUN
fuelectenerg-6011	166	39	operation	operation	NOUN
fuelectenerg-6011	166	40	and	and	CCONJ
fuelectenerg-6011	166	41	increases	increase	VERB
fuelectenerg-6011	166	42	the	the	DET
fuelectenerg-6011	166	43	coupling	coupling	NOUN
fuelectenerg-6011	166	44	ratio	ratio	NOUN
fuelectenerg-6011	166	45	to	to	ADP
fuelectenerg-6011	166	46	the	the	DET
fuelectenerg-6011	166	47	nc	nc	PROPN
fuelectenerg-6011	166	48	layer	layer	NOUN
fuelectenerg-6011	166	49	which	which	PRON
fuelectenerg-6011	166	50	results	result	VERB
fuelectenerg-6011	166	51	in	in	ADP
fuelectenerg-6011	166	52	good	good	ADJ
fuelectenerg-6011	166	53	charge	charge	NOUN
fuelectenerg-6011	166	54	storage	storage	NOUN
fuelectenerg-6011	166	55	feature	feature	NOUN
fuelectenerg-6011	166	56	.	.	PUNCT
fuelectenerg-6011	167	1	v.	v.	ADP
fuelectenerg-6011	167	2	mikhelashvili	mikhelashvili	PROPN
fuelectenerg-6011	167	3	et	et	PROPN
fuelectenerg-6011	167	4	.	.	PUNCT
fuelectenerg-6011	168	1	al	al	PROPN
fuelectenerg-6011	168	2	.	.	PUNCT
fuelectenerg-6011	169	1	[	[	X
fuelectenerg-6011	169	2	44	44	NUM
fuelectenerg-6011	169	3	]	]	PUNCT
fuelectenerg-6011	169	4	in	in	ADP
fuelectenerg-6011	169	5	2010	2010	NUM
fuelectenerg-6011	169	6	proposed	propose	VERB
fuelectenerg-6011	169	7	and	and	CCONJ
fuelectenerg-6011	169	8	demonstrated	demonstrate	VERB
fuelectenerg-6011	169	9	a	a	DET
fuelectenerg-6011	169	10	double	double	ADJ
fuelectenerg-6011	169	11	-	-	PUNCT
fuelectenerg-6011	169	12	layer	layer	NOUN
fuelectenerg-6011	169	13	memory	memory	NOUN
fuelectenerg-6011	169	14	capacitor	capacitor	NOUN
fuelectenerg-6011	169	15	comprising	comprising	NOUN
fuelectenerg-6011	169	16	of	of	ADP
fuelectenerg-6011	169	17	two	two	NUM
fuelectenerg-6011	169	18	au	au	ADJ
fuelectenerg-6011	169	19	nanoparticle	nanoparticle	NOUN
fuelectenerg-6011	169	20	layers	layer	NOUN
fuelectenerg-6011	169	21	separated	separate	VERB
fuelectenerg-6011	169	22	by	by	ADP
fuelectenerg-6011	169	23	hfo2	hfo2	NOUN
fuelectenerg-6011	169	24	film	film	NOUN
fuelectenerg-6011	169	25	.	.	PUNCT
fuelectenerg-6011	170	1	hfo2	hfo2	PROPN
fuelectenerg-6011	170	2	was	be	AUX
fuelectenerg-6011	170	3	also	also	ADV
fuelectenerg-6011	170	4	used	use	VERB
fuelectenerg-6011	170	5	for	for	ADP
fuelectenerg-6011	170	6	the	the	DET
fuelectenerg-6011	170	7	tunneling	tunneling	NOUN
fuelectenerg-6011	170	8	layer	layer	NOUN
fuelectenerg-6011	170	9	whereas	whereas	SCONJ
fuelectenerg-6011	170	10	the	the	DET
fuelectenerg-6011	170	11	blocking	blocking	NOUN
fuelectenerg-6011	170	12	insulator	insulator	NOUN
fuelectenerg-6011	170	13	was	be	AUX
fuelectenerg-6011	170	14	based	base	VERB
fuelectenerg-6011	170	15	on	on	ADP
fuelectenerg-6011	170	16	a	a	DET
fuelectenerg-6011	170	17	hfn	hfn	NOUN
fuelectenerg-6011	170	18	/	/	SYM
fuelectenerg-6011	170	19	hftio	hftio	NOUN
fuelectenerg-6011	170	20	multilayer	multilayer	ADJ
fuelectenerg-6011	170	21	stack	stack	NOUN
fuelectenerg-6011	170	22	having	have	VERB
fuelectenerg-6011	170	23	a	a	DET
fuelectenerg-6011	170	24	dielectric	dielectric	ADJ
fuelectenerg-6011	170	25	constant	constant	ADJ
fuelectenerg-6011	170	26	larger	large	ADJ
fuelectenerg-6011	170	27	than	than	ADP
fuelectenerg-6011	170	28	35	35	NUM
fuelectenerg-6011	170	29	.	.	PUNCT
fuelectenerg-6011	171	1	the	the	DET
fuelectenerg-6011	171	2	structure	structure	NOUN
fuelectenerg-6011	171	3	exhibits	exhibit	VERB
fuelectenerg-6011	171	4	excellent	excellent	ADJ
fuelectenerg-6011	171	5	performance	performance	NOUN
fuelectenerg-6011	171	6	in	in	ADP
fuelectenerg-6011	171	7	terms	term	NOUN
fuelectenerg-6011	171	8	of	of	ADP
fuelectenerg-6011	171	9	the	the	DET
fuelectenerg-6011	171	10	hysteresis	hysteresis	NOUN
fuelectenerg-6011	171	11	window	window	NOUN
fuelectenerg-6011	171	12	,	,	PUNCT
fuelectenerg-6011	171	13	the	the	DET
fuelectenerg-6011	171	14	stored	store	VERB
fuelectenerg-6011	171	15	charge	charge	NOUN
fuelectenerg-6011	171	16	density	density	NOUN
fuelectenerg-6011	171	17	,	,	PUNCT
fuelectenerg-6011	171	18	the	the	DET
fuelectenerg-6011	171	19	leakage	leakage	NOUN
fuelectenerg-6011	171	20	current	current	NOUN
fuelectenerg-6011	171	21	,	,	PUNCT
fuelectenerg-6011	171	22	the	the	DET
fuelectenerg-6011	171	23	eot	eot	PROPN
fuelectenerg-6011	171	24	and	and	CCONJ
fuelectenerg-6011	171	25	its	its	PRON
fuelectenerg-6011	171	26	retention	retention	NOUN
fuelectenerg-6011	171	27	properties	property	NOUN
fuelectenerg-6011	171	28	.	.	PUNCT
fuelectenerg-6011	172	1	g.	g.	PROPN
fuelectenerg-6011	172	2	gay	gay	PROPN
fuelectenerg-6011	172	3	et	et	PROPN
fuelectenerg-6011	172	4	.	.	PUNCT
fuelectenerg-6011	173	1	al	al	PROPN
fuelectenerg-6011	173	2	.	.	PUNCT
fuelectenerg-6011	174	1	[	[	X
fuelectenerg-6011	174	2	45	45	NUM
fuelectenerg-6011	174	3	]	]	PUNCT
fuelectenerg-6011	174	4	in	in	ADP
fuelectenerg-6011	174	5	2010	2010	NUM
fuelectenerg-6011	174	6	fabricated	fabricate	VERB
fuelectenerg-6011	174	7	the	the	DET
fuelectenerg-6011	174	8	devices	device	NOUN
fuelectenerg-6011	174	9	with	with	ADP
fuelectenerg-6011	174	10	tin	tin	NOUN
fuelectenerg-6011	174	11	ncs	ncs	NOUN
fuelectenerg-6011	174	12	embedded	embed	VERB
fuelectenerg-6011	174	13	in	in	ADP
fuelectenerg-6011	174	14	sin	sin	NOUN
fuelectenerg-6011	174	15	and	and	CCONJ
fuelectenerg-6011	174	16	observed	observe	VERB
fuelectenerg-6011	174	17	that	that	SCONJ
fuelectenerg-6011	174	18	the	the	DET
fuelectenerg-6011	174	19	devices	device	NOUN
fuelectenerg-6011	174	20	were	be	AUX
fuelectenerg-6011	174	21	erased	erase	VERB
fuelectenerg-6011	174	22	10	10	NUM
fuelectenerg-6011	174	23	2	2	NUM
fuelectenerg-6011	174	24	faster	fast	ADV
fuelectenerg-6011	174	25	and	and	CCONJ
fuelectenerg-6011	174	26	shows	show	VERB
fuelectenerg-6011	174	27	large	large	ADJ
fuelectenerg-6011	174	28	memory	memory	NOUN
fuelectenerg-6011	174	29	window	window	NOUN
fuelectenerg-6011	174	30	(	(	PUNCT
fuelectenerg-6011	174	31	10	10	NUM
fuelectenerg-6011	174	32	v	v	NOUN
fuelectenerg-6011	174	33	)	)	PUNCT
fuelectenerg-6011	174	34	as	as	ADP
fuelectenerg-6011	174	35	compared	compare	VERB
fuelectenerg-6011	174	36	to	to	ADP
fuelectenerg-6011	174	37	devices	device	NOUN
fuelectenerg-6011	174	38	with	with	ADP
fuelectenerg-6011	174	39	pure	pure	ADJ
fuelectenerg-6011	174	40	sin	sin	NOUN
fuelectenerg-6011	174	41	trapping	trap	VERB
fuelectenerg-6011	174	42	layer	layer	NOUN
fuelectenerg-6011	174	43	.	.	PUNCT
fuelectenerg-6011	175	1	larysa	larysa	NOUN
fuelectenerg-6011	175	2	khomenkova	khomenkova	PROPN
fuelectenerg-6011	175	3	et	et	PROPN
fuelectenerg-6011	175	4	.	.	PUNCT
fuelectenerg-6011	176	1	al	al	PROPN
fuelectenerg-6011	176	2	.	.	PUNCT
fuelectenerg-6011	177	1	[	[	X
fuelectenerg-6011	177	2	46	46	NUM
fuelectenerg-6011	177	3	]	]	PUNCT
fuelectenerg-6011	177	4	in	in	ADP
fuelectenerg-6011	177	5	2011	2011	NUM
fuelectenerg-6011	177	6	demonstrated	demonstrate	VERB
fuelectenerg-6011	177	7	the	the	DET
fuelectenerg-6011	177	8	application	application	NOUN
fuelectenerg-6011	177	9	of	of	ADP
fuelectenerg-6011	177	10	pure	pure	ADJ
fuelectenerg-6011	177	11	hfo2	hfo2	NOUN
fuelectenerg-6011	177	12	and	and	CCONJ
fuelectenerg-6011	177	13	hfsio	hfsio	NOUN
fuelectenerg-6011	177	14	layers	layer	NOUN
fuelectenerg-6011	177	15	fabricated	fabricate	VERB
fuelectenerg-6011	177	16	by	by	ADP
fuelectenerg-6011	177	17	rf	rf	VERB
fuelectenerg-6011	177	18	magnetron	magnetron	NOUN
fuelectenerg-6011	177	19	sputtering	sputtering	NOUN
fuelectenerg-6011	177	20	as	as	ADP
fuelectenerg-6011	177	21	alternative	alternative	ADJ
fuelectenerg-6011	177	22	tunnel	tunnel	NOUN
fuelectenerg-6011	177	23	layers	layer	NOUN
fuelectenerg-6011	177	24	for	for	ADP
fuelectenerg-6011	177	25	high	high	ADJ
fuelectenerg-6011	177	26	-	-	PUNCT
fuelectenerg-6011	177	27	k	k	NOUN
fuelectenerg-6011	177	28	/	/	SYM
fuelectenerg-6011	177	29	si	si	ADJ
fuelectenerg-6011	177	30	-	-	ADJ
fuelectenerg-6011	177	31	ncssio2	ncssio2	ADJ
fuelectenerg-6011	177	32	/	/	SYM
fuelectenerg-6011	177	33	sio2	sio2	PROPN
fuelectenerg-6011	177	34	memory	memory	NOUN
fuelectenerg-6011	177	35	structures	structure	NOUN
fuelectenerg-6011	177	36	and	and	CCONJ
fuelectenerg-6011	177	37	indicates	indicate	VERB
fuelectenerg-6011	177	38	the	the	DET
fuelectenerg-6011	177	39	utility	utility	NOUN
fuelectenerg-6011	177	40	of	of	ADP
fuelectenerg-6011	177	41	these	these	DET
fuelectenerg-6011	177	42	stack	stack	NOUN
fuelectenerg-6011	177	43	structures	structure	NOUN
fuelectenerg-6011	177	44	for	for	ADP
fuelectenerg-6011	177	45	lowoperating	lowoperate	VERB
fuelectenerg-6011	177	46	-	-	PUNCT
fuelectenerg-6011	177	47	voltage	voltage	NOUN
fuelectenerg-6011	177	48	nvm	nvm	NOUN
fuelectenerg-6011	177	49	devices	device	NOUN
fuelectenerg-6011	177	50	with	with	ADP
fuelectenerg-6011	177	51	specific	specific	ADJ
fuelectenerg-6011	177	52	deposition	deposition	NOUN
fuelectenerg-6011	177	53	conditions	condition	NOUN
fuelectenerg-6011	177	54	and	and	CCONJ
fuelectenerg-6011	177	55	annealing	anneal	VERB
fuelectenerg-6011	177	56	treatment	treatment	NOUN
fuelectenerg-6011	177	57	.	.	PUNCT
fuelectenerg-6011	178	1	g.	g.	PROPN
fuelectenerg-6011	178	2	x.	x.	PROPN
fuelectenerg-6011	178	3	li	li	PROPN
fuelectenerg-6011	179	1	[	[	X
fuelectenerg-6011	179	2	47	47	NUM
fuelectenerg-6011	179	3	]	]	PUNCT
fuelectenerg-6011	179	4	et	et	PROPN
fuelectenerg-6011	179	5	.	.	PUNCT
fuelectenerg-6011	180	1	al	al	PROPN
fuelectenerg-6011	180	2	.	.	PROPN
fuelectenerg-6011	181	1	in	in	ADP
fuelectenerg-6011	181	2	2011	2011	NUM
fuelectenerg-6011	181	3	demonstrated	demonstrate	VERB
fuelectenerg-6011	181	4	that	that	SCONJ
fuelectenerg-6011	181	5	hf	hf	ADJ
fuelectenerg-6011	181	6	-	-	PUNCT
fuelectenerg-6011	181	7	rich	rich	ADJ
fuelectenerg-6011	181	8	films	film	NOUN
fuelectenerg-6011	181	9	tend	tend	VERB
fuelectenerg-6011	181	10	to	to	PART
fuelectenerg-6011	181	11	form	form	VERB
fuelectenerg-6011	181	12	thicker	thick	ADJ
fuelectenerg-6011	181	13	interfacial	interfacial	ADJ
fuelectenerg-6011	181	14	layer	layer	NOUN
fuelectenerg-6011	181	15	due	due	ADP
fuelectenerg-6011	181	16	to	to	ADP
fuelectenerg-6011	181	17	the	the	DET
fuelectenerg-6011	181	18	stability	stability	NOUN
fuelectenerg-6011	181	19	of	of	ADP
fuelectenerg-6011	181	20	hfo2	hfo2	NOUN
fuelectenerg-6011	181	21	whereas	whereas	SCONJ
fuelectenerg-6011	181	22	ti	ti	ADJ
fuelectenerg-6011	181	23	-	-	ADJ
fuelectenerg-6011	181	24	rich	rich	ADJ
fuelectenerg-6011	181	25	films	film	NOUN
fuelectenerg-6011	181	26	usually	usually	ADV
fuelectenerg-6011	181	27	demonstrate	demonstrate	VERB
fuelectenerg-6011	181	28	higher	high	ADJ
fuelectenerg-6011	181	29	leakage	leakage	NOUN
fuelectenerg-6011	181	30	current	current	NOUN
fuelectenerg-6011	181	31	owing	owe	VERB
fuelectenerg-6011	181	32	to	to	ADP
fuelectenerg-6011	181	33	the	the	DET
fuelectenerg-6011	181	34	low	low	ADJ
fuelectenerg-6011	181	35	band	band	NOUN
fuelectenerg-6011	181	36	gap	gap	NOUN
fuelectenerg-6011	181	37	of	of	ADP
fuelectenerg-6011	181	38	tio2	tio2	NOUN
fuelectenerg-6011	181	39	.	.	PUNCT
fuelectenerg-6011	182	1	overall	overall	ADV
fuelectenerg-6011	182	2	,	,	PUNCT
fuelectenerg-6011	182	3	the	the	DET
fuelectenerg-6011	182	4	20	20	NUM
fuelectenerg-6011	182	5	-	-	PUNCT
fuelectenerg-6011	182	6	nm	nm	NOUN
fuelectenerg-6011	182	7	-	-	ADJ
fuelectenerg-6011	182	8	thick	thick	ADJ
fuelectenerg-6011	182	9	films	film	NOUN
fuelectenerg-6011	182	10	with	with	ADP
fuelectenerg-6011	182	11	hf	hf	PROPN
fuelectenerg-6011	182	12	/	/	SYM
fuelectenerg-6011	182	13	ti	ti	NOUN
fuelectenerg-6011	182	14	ratio	ratio	NOUN
fuelectenerg-6011	182	15	of	of	ADP
fuelectenerg-6011	182	16	46/54	46/54	NUM
fuelectenerg-6011	182	17	exhibit	exhibit	VERB
fuelectenerg-6011	182	18	high	high	ADJ
fuelectenerg-6011	182	19	permittivity	permittivity	NOUN
fuelectenerg-6011	182	20	up	up	ADP
fuelectenerg-6011	182	21	to	to	PART
fuelectenerg-6011	182	22	50	50	NUM
fuelectenerg-6011	182	23	while	while	SCONJ
fuelectenerg-6011	182	24	maintaining	maintain	VERB
fuelectenerg-6011	182	25	the	the	DET
fuelectenerg-6011	182	26	relatively	relatively	ADV
fuelectenerg-6011	182	27	low	low	ADJ
fuelectenerg-6011	182	28	leakage	leakage	NOUN
fuelectenerg-6011	182	29	current	current	NOUN
fuelectenerg-6011	182	30	of	of	ADP
fuelectenerg-6011	182	31	1.2	1.2	NUM
fuelectenerg-6011	182	32	×	×	NOUN
fuelectenerg-6011	182	33	10	10	NUM
fuelectenerg-6011	182	34	−8	−8	ADP
fuelectenerg-6011	182	35	a	a	DET
fuelectenerg-6011	182	36	/	/	SYM
fuelectenerg-6011	182	37	cm	cm	NOUN
fuelectenerg-6011	182	38	2	2	NUM
fuelectenerg-6011	182	39	at	at	ADP
fuelectenerg-6011	182	40	1	1	NUM
fuelectenerg-6011	182	41	v	v	NOUN
fuelectenerg-6011	182	42	bias	bias	NOUN
fuelectenerg-6011	182	43	which	which	PRON
fuelectenerg-6011	182	44	would	would	AUX
fuelectenerg-6011	182	45	be	be	AUX
fuelectenerg-6011	182	46	the	the	DET
fuelectenerg-6011	182	47	promising	promising	ADJ
fuelectenerg-6011	182	48	candidate	candidate	NOUN
fuelectenerg-6011	182	49	to	to	PART
fuelectenerg-6011	182	50	replace	replace	VERB
fuelectenerg-6011	182	51	hfo2	hfo2	NOUN
fuelectenerg-6011	182	52	for	for	ADP
fuelectenerg-6011	182	53	the	the	DET
fuelectenerg-6011	182	54	next	next	ADJ
fuelectenerg-6011	182	55	generation	generation	NOUN
fuelectenerg-6011	182	56	technology	technology	NOUN
fuelectenerg-6011	182	57	.	.	PUNCT
fuelectenerg-6011	183	1	minseong	minseong	PROPN
fuelectenerg-6011	183	2	yun	yun	PROPN
fuelectenerg-6011	184	1	[	[	X
fuelectenerg-6011	184	2	48	48	NUM
fuelectenerg-6011	184	3	]	]	PUNCT
fuelectenerg-6011	184	4	et	et	NOUN
fuelectenerg-6011	184	5	.	.	PUNCT
fuelectenerg-6011	185	1	al	al	PROPN
fuelectenerg-6011	185	2	.	.	PROPN
fuelectenerg-6011	186	1	in	in	ADP
fuelectenerg-6011	186	2	2012	2012	NUM
fuelectenerg-6011	186	3	demonstrated	demonstrate	VERB
fuelectenerg-6011	186	4	high	high	ADJ
fuelectenerg-6011	186	5	density	density	NOUN
fuelectenerg-6011	186	6	multi	multi	ADJ
fuelectenerg-6011	186	7	-	-	ADJ
fuelectenerg-6011	186	8	layer	layer	ADJ
fuelectenerg-6011	186	9	pt	pt	NOUN
fuelectenerg-6011	186	10	nanoparticle	nanoparticle	NOUN
fuelectenerg-6011	186	11	embedded	embed	VERB
fuelectenerg-6011	186	12	memory	memory	NOUN
fuelectenerg-6011	186	13	device	device	NOUN
fuelectenerg-6011	186	14	with	with	ADP
fuelectenerg-6011	186	15	enhanced	enhanced	ADJ
fuelectenerg-6011	186	16	memory	memory	NOUN
fuelectenerg-6011	186	17	window	window	NOUN
fuelectenerg-6011	186	18	and	and	CCONJ
fuelectenerg-6011	186	19	better	well	ADJ
fuelectenerg-6011	186	20	retention	retention	NOUN
fuelectenerg-6011	186	21	property	property	NOUN
fuelectenerg-6011	186	22	.	.	PUNCT
fuelectenerg-6011	187	1	chih	chih	PROPN
fuelectenerg-6011	187	2	-	-	PUNCT
fuelectenerg-6011	187	3	ting	ting	PROPN
fuelectenerg-6011	187	4	lin	lin	PROPN
fuelectenerg-6011	187	5	et	et	PROPN
fuelectenerg-6011	187	6	.	.	PUNCT
fuelectenerg-6011	188	1	al	al	PROPN
fuelectenerg-6011	188	2	.	.	PUNCT
fuelectenerg-6011	189	1	[	[	X
fuelectenerg-6011	189	2	49	49	NUM
fuelectenerg-6011	189	3	]	]	PUNCT
fuelectenerg-6011	189	4	in	in	ADP
fuelectenerg-6011	189	5	2013	2013	NUM
fuelectenerg-6011	189	6	revealed	reveal	VERB
fuelectenerg-6011	189	7	that	that	SCONJ
fuelectenerg-6011	189	8	the	the	DET
fuelectenerg-6011	189	9	memory	memory	NOUN
fuelectenerg-6011	189	10	window	window	NOUN
fuelectenerg-6011	189	11	becomes	become	VERB
fuelectenerg-6011	189	12	larger	large	ADJ
fuelectenerg-6011	189	13	at	at	ADP
fuelectenerg-6011	189	14	elevated	elevated	ADJ
fuelectenerg-6011	189	15	annealing	anneal	VERB
fuelectenerg-6011	189	16	temperatures	temperature	NOUN
fuelectenerg-6011	189	17	due	due	ADJ
fuelectenerg-6011	189	18	to	to	ADP
fuelectenerg-6011	189	19	the	the	DET
fuelectenerg-6011	189	20	high	high	ADJ
fuelectenerg-6011	189	21	density	density	NOUN
fuelectenerg-6011	189	22	of	of	ADP
fuelectenerg-6011	189	23	au	au	NOUN
fuelectenerg-6011	189	24	-	-	NOUN
fuelectenerg-6011	189	25	ncs	ncs	NOUN
fuelectenerg-6011	189	26	.	.	PUNCT
fuelectenerg-6011	190	1	the	the	DET
fuelectenerg-6011	190	2	optimized	optimize	VERB
fuelectenerg-6011	190	3	annealing	annealing	NOUN
fuelectenerg-6011	190	4	condition	condition	NOUN
fuelectenerg-6011	190	5	was	be	AUX
fuelectenerg-6011	190	6	700	700	NUM
fuelectenerg-6011	190	7	0	0	NUM
fuelectenerg-6011	190	8	c	c	NOUN
fuelectenerg-6011	190	9	because	because	SCONJ
fuelectenerg-6011	190	10	of	of	ADP
fuelectenerg-6011	190	11	the	the	DET
fuelectenerg-6011	190	12	large	large	ADJ
fuelectenerg-6011	190	13	space	space	NOUN
fuelectenerg-6011	190	14	between	between	ADP
fuelectenerg-6011	190	15	ncs	ncs	PROPN
fuelectenerg-6011	190	16	.	.	PUNCT
fuelectenerg-6011	191	1	jun	jun	PROPN
fuelectenerg-6011	191	2	-	-	PUNCT
fuelectenerg-6011	191	3	hyuk	hyuk	PROPN
fuelectenerg-6011	191	4	seo	seo	PROPN
fuelectenerg-6011	191	5	et	et	PROPN
fuelectenerg-6011	191	6	.	.	PUNCT
fuelectenerg-6011	192	1	al	al	PROPN
fuelectenerg-6011	192	2	.	.	PUNCT
fuelectenerg-6011	193	1	[	[	X
fuelectenerg-6011	193	2	50	50	NUM
fuelectenerg-6011	193	3	]	]	PUNCT
fuelectenerg-6011	193	4	in	in	ADP
fuelectenerg-6011	193	5	2013	2013	NUM
fuelectenerg-6011	193	6	fabricated	fabricate	VERB
fuelectenerg-6011	193	7	a	a	DET
fuelectenerg-6011	193	8	mos	mos	NOUN
fuelectenerg-6011	193	9	capacitor	capacitor	NOUN
fuelectenerg-6011	193	10	containing	contain	VERB
fuelectenerg-6011	193	11	au	au	ADP
fuelectenerg-6011	193	12	nanocrystals	nanocrystal	NOUN
fuelectenerg-6011	193	13	in	in	ADP
fuelectenerg-6011	193	14	a	a	DET
fuelectenerg-6011	193	15	stepped	step	VERB
fuelectenerg-6011	193	16	hfo2	hfo2	NOUN
fuelectenerg-6011	193	17	and	and	CCONJ
fuelectenerg-6011	193	18	sio2	sio2	PROPN
fuelectenerg-6011	193	19	tunneling	tunneling	NOUN
fuelectenerg-6011	193	20	oxide	oxide	NOUN
fuelectenerg-6011	193	21	matrix	matrix	NOUN
fuelectenerg-6011	193	22	.	.	PUNCT
fuelectenerg-6011	194	1	memory	memory	NOUN
fuelectenerg-6011	194	2	window	window	NOUN
fuelectenerg-6011	194	3	effects	effect	NOUN
fuelectenerg-6011	194	4	were	be	AUX
fuelectenerg-6011	194	5	observed	observe	VERB
fuelectenerg-6011	194	6	due	due	ADJ
fuelectenerg-6011	194	7	to	to	ADP
fuelectenerg-6011	194	8	the	the	DET
fuelectenerg-6011	194	9	successive	successive	ADJ
fuelectenerg-6011	194	10	charge	charge	NOUN
fuelectenerg-6011	194	11	trapping	trap	VERB
fuelectenerg-6011	194	12	in	in	ADP
fuelectenerg-6011	194	13	au	au	ADJ
fuelectenerg-6011	194	14	nanocrystals	nanocrystal	NOUN
fuelectenerg-6011	194	15	by	by	ADP
fuelectenerg-6011	194	16	controlling	control	VERB
fuelectenerg-6011	194	17	the	the	DET
fuelectenerg-6011	194	18	electric	electric	ADJ
fuelectenerg-6011	194	19	field	field	NOUN
fuelectenerg-6011	194	20	distribution	distribution	NOUN
fuelectenerg-6011	194	21	via	via	ADP
fuelectenerg-6011	194	22	the	the	DET
fuelectenerg-6011	194	23	tunneling	tunneling	NOUN
fuelectenerg-6011	194	24	oxide	oxide	NOUN
fuelectenerg-6011	194	25	.	.	PUNCT
fuelectenerg-6011	195	1	wenchieh	wenchieh	VERB
fuelectenerg-6011	195	2	shih	shih	PROPN
fuelectenerg-6011	195	3	et	et	PROPN
fuelectenerg-6011	195	4	.	.	PUNCT
fuelectenerg-6011	196	1	al	al	PROPN
fuelectenerg-6011	196	2	.	.	PUNCT
fuelectenerg-6011	197	1	[	[	X
fuelectenerg-6011	197	2	51	51	NUM
fuelectenerg-6011	197	3	]	]	PUNCT
fuelectenerg-6011	197	4	in	in	ADP
fuelectenerg-6011	197	5	2013	2013	NUM
fuelectenerg-6011	197	6	studied	study	VERB
fuelectenerg-6011	197	7	mytos	myto	NOUN
fuelectenerg-6011	197	8	device	device	NOUN
fuelectenerg-6011	197	9	i.e	i.e	PRON
fuelectenerg-6011	197	10	metal	metal	NOUN
fuelectenerg-6011	197	11	-	-	PUNCT
fuelectenerg-6011	197	12	yttrium	yttrium	NOUN
fuelectenerg-6011	197	13	oxide	oxide	NOUN
fuelectenerg-6011	197	14	-	-	PUNCT
fuelectenerg-6011	197	15	tantalum	tantalum	NOUN
fuelectenerg-6011	197	16	oxide	oxide	NOUN
fuelectenerg-6011	197	17	-	-	PUNCT
fuelectenerg-6011	197	18	silicon	silicon	NOUN
fuelectenerg-6011	197	19	oxide	oxide	NOUN
fuelectenerg-6011	197	20	-	-	PUNCT
fuelectenerg-6011	197	21	silicon	silicon	NOUN
fuelectenerg-6011	197	22	(	(	PUNCT
fuelectenerg-6011	197	23	al	al	PROPN
fuelectenerg-6011	197	24	/	/	SYM
fuelectenerg-6011	197	25	y2o3	y2o3	PROPN
fuelectenerg-6011	197	26	/	/	SYM
fuelectenerg-6011	197	27	ta2o5	ta2o5	PROPN
fuelectenerg-6011	197	28	/	/	SYM
fuelectenerg-6011	197	29	sio2	sio2	PROPN
fuelectenerg-6011	197	30	/	/	SYM
fuelectenerg-6011	197	31	si	si	NOUN
fuelectenerg-6011	197	32	)	)	PUNCT
fuelectenerg-6011	197	33	and	and	CCONJ
fuelectenerg-6011	197	34	showed	show	VERB
fuelectenerg-6011	197	35	that	that	SCONJ
fuelectenerg-6011	197	36	the	the	DET
fuelectenerg-6011	197	37	large	large	ADJ
fuelectenerg-6011	197	38	conduction	conduction	NOUN
fuelectenerg-6011	197	39	band	band	NOUN
fuelectenerg-6011	197	40	offset	offset	VERB
fuelectenerg-6011	197	41	at	at	ADP
fuelectenerg-6011	197	42	the	the	DET
fuelectenerg-6011	197	43	ta2o5	ta2o5	PROPN
fuelectenerg-6011	197	44	/	/	SYM
fuelectenerg-6011	197	45	sio2	sio2	PROPN
fuelectenerg-6011	197	46	and	and	CCONJ
fuelectenerg-6011	197	47	the	the	DET
fuelectenerg-6011	197	48	y2o3	y2o3	PROPN
fuelectenerg-6011	197	49	/	/	SYM
fuelectenerg-6011	197	50	ta2o5	ta2o5	PROPN
fuelectenerg-6011	197	51	interfaces	interface	NOUN
fuelectenerg-6011	197	52	is	be	AUX
fuelectenerg-6011	197	53	expected	expect	VERB
fuelectenerg-6011	197	54	to	to	PART
fuelectenerg-6011	197	55	give	give	VERB
fuelectenerg-6011	197	56	better	well	ADJ
fuelectenerg-6011	197	57	blocking	block	VERB
fuelectenerg-6011	197	58	efficiency	efficiency	NOUN
fuelectenerg-6011	197	59	which	which	PRON
fuelectenerg-6011	197	60	will	will	AUX
fuelectenerg-6011	197	61	improve	improve	VERB
fuelectenerg-6011	197	62	memory	memory	NOUN
fuelectenerg-6011	197	63	window	window	NOUN
fuelectenerg-6011	197	64	and	and	CCONJ
fuelectenerg-6011	197	65	programming	programming	NOUN
fuelectenerg-6011	197	66	speed	speed	NOUN
fuelectenerg-6011	197	67	and	and	CCONJ
fuelectenerg-6011	197	68	can	can	AUX
fuelectenerg-6011	197	69	also	also	ADV
fuelectenerg-6011	197	70	relieve	relieve	VERB
fuelectenerg-6011	197	71	over	over	ADP
fuelectenerg-6011	197	72	erase	erase	NOUN
fuelectenerg-6011	197	73	problem	problem	NOUN
fuelectenerg-6011	197	74	.	.	PUNCT
fuelectenerg-6011	198	1	guoxing	guoxe	VERB
fuelectenerg-6011	198	2	chen	chen	PROPN
fuelectenerg-6011	198	3	et	et	PROPN
fuelectenerg-6011	198	4	.	.	PUNCT
fuelectenerg-6011	199	1	al	al	PROPN
fuelectenerg-6011	199	2	.	.	PUNCT
fuelectenerg-6011	200	1	[	[	X
fuelectenerg-6011	200	2	52	52	NUM
fuelectenerg-6011	200	3	]	]	PUNCT
fuelectenerg-6011	200	4	in	in	ADP
fuelectenerg-6011	200	5	2014	2014	NUM
fuelectenerg-6011	200	6	demonstrated	demonstrate	VERB
fuelectenerg-6011	200	7	that	that	SCONJ
fuelectenerg-6011	200	8	metal	metal	NOUN
fuelectenerg-6011	200	9	floating	float	VERB
fuelectenerg-6011	200	10	gate	gate	NOUN
fuelectenerg-6011	200	11	capacitor	capacitor	NOUN
fuelectenerg-6011	200	12	si	si	PROPN
fuelectenerg-6011	200	13	/	/	SYM
fuelectenerg-6011	200	14	sio2	sio2	PROPN
fuelectenerg-6011	200	15	-	-	PUNCT
fuelectenerg-6011	200	16	2.7	2.7	NUM
fuelectenerg-6011	200	17	/	/	SYM
fuelectenerg-6011	200	18	hfo2	hfo2	NOUN
fuelectenerg-6011	200	19	-	-	PUNCT
fuelectenerg-6011	200	20	8	8	NUM
fuelectenerg-6011	200	21	/	/	SYM
fuelectenerg-6011	200	22	tan-8	tan-8	ADP
fuelectenerg-6011	200	23	/	/	SYM
fuelectenerg-6011	200	24	al2o3	al2o3	NOUN
fuelectenerg-6011	200	25	-	-	PUNCT
fuelectenerg-6011	200	26	15	15	NUM
fuelectenerg-6011	200	27	/	/	SYM
fuelectenerg-6011	200	28	au	au	NOUN
fuelectenerg-6011	200	29	150	150	NUM
fuelectenerg-6011	200	30	presents	present	NOUN
fuelectenerg-6011	200	31	favorable	favorable	ADJ
fuelectenerg-6011	200	32	performance	performance	NOUN
fuelectenerg-6011	200	33	with	with	ADP
fuelectenerg-6011	200	34	lower	low	ADJ
fuelectenerg-6011	200	35	operation	operation	NOUN
fuelectenerg-6011	200	36	voltage	voltage	NOUN
fuelectenerg-6011	200	37	as	as	ADV
fuelectenerg-6011	200	38	well	well	ADV
fuelectenerg-6011	200	39	as	as	ADP
fuelectenerg-6011	200	40	enhanced	enhanced	ADJ
fuelectenerg-6011	200	41	program	program	NOUN
fuelectenerg-6011	200	42	/	/	SYM
fuelectenerg-6011	200	43	erase	erase	NOUN
fuelectenerg-6011	200	44	speed	speed	NOUN
fuelectenerg-6011	200	45	and	and	CCONJ
fuelectenerg-6011	200	46	improvement	improvement	NOUN
fuelectenerg-6011	200	47	of	of	ADP
fuelectenerg-6011	200	48	data	datum	NOUN
fuelectenerg-6011	200	49	retention	retention	NOUN
fuelectenerg-6011	200	50	compared	compare	VERB
fuelectenerg-6011	200	51	to	to	ADP
fuelectenerg-6011	200	52	si	si	PROPN
fuelectenerg-6011	200	53	/	/	SYM
fuelectenerg-6011	200	54	sio2	sio2	PROPN
fuelectenerg-6011	200	55	-	-	PUNCT
fuelectenerg-6011	200	56	4.5	4.5	NUM
fuelectenerg-6011	200	57	/	/	SYM
fuelectenerg-6011	200	58	tan8	tan8	PROPN
fuelectenerg-6011	200	59	/	/	SYM
fuelectenerg-6011	200	60	al2o3	al2o3	PROPN
fuelectenerg-6011	200	61	-	-	PUNCT
fuelectenerg-6011	200	62	15	15	NUM
fuelectenerg-6011	200	63	/	/	SYM
fuelectenerg-6011	200	64	au-150	au-150	NOUN
fuelectenerg-6011	200	65	floating	float	VERB
fuelectenerg-6011	200	66	gate	gate	NOUN
fuelectenerg-6011	200	67	cell	cell	NOUN
fuelectenerg-6011	200	68	.	.	PUNCT
fuelectenerg-6011	201	1	thus	thus	ADV
fuelectenerg-6011	201	2	,	,	PUNCT
fuelectenerg-6011	201	3	the	the	DET
fuelectenerg-6011	201	4	program	program	NOUN
fuelectenerg-6011	201	5	/	/	SYM
fuelectenerg-6011	201	6	erase	erase	NOUN
fuelectenerg-6011	201	7	speed	speed	NOUN
fuelectenerg-6011	201	8	can	can	AUX
fuelectenerg-6011	201	9	be	be	AUX
fuelectenerg-6011	201	10	enhanced	enhance	VERB
fuelectenerg-6011	201	11	using	use	VERB
fuelectenerg-6011	201	12	a	a	DET
fuelectenerg-6011	201	13	high	high	ADJ
fuelectenerg-6011	201	14	-	-	PUNCT
fuelectenerg-6011	201	15	k	k	NOUN
fuelectenerg-6011	201	16	blocking	block	VERB
fuelectenerg-6011	201	17	layer	layer	NOUN
fuelectenerg-6011	201	18	.	.	PUNCT
fuelectenerg-6011	202	1	metal	metal	NOUN
fuelectenerg-6011	202	2	oxides	oxide	NOUN
fuelectenerg-6011	202	3	shows	show	VERB
fuelectenerg-6011	202	4	potential	potential	NOUN
fuelectenerg-6011	202	5	for	for	ADP
fuelectenerg-6011	202	6	the	the	DET
fuelectenerg-6011	202	7	high	high	ADJ
fuelectenerg-6011	202	8	-	-	PUNCT
fuelectenerg-6011	202	9	k	k	NOUN
fuelectenerg-6011	202	10	gate	gate	NOUN
fuelectenerg-6011	202	11	materials	material	NOUN
fuelectenerg-6011	202	12	because	because	SCONJ
fuelectenerg-6011	202	13	of	of	ADP
fuelectenerg-6011	202	14	chemical	chemical	ADJ
fuelectenerg-6011	202	15	stability	stability	NOUN
fuelectenerg-6011	202	16	at	at	ADP
fuelectenerg-6011	202	17	si	si	PROPN
fuelectenerg-6011	202	18	interface	interface	NOUN
fuelectenerg-6011	202	19	.	.	PUNCT
fuelectenerg-6011	203	1	table	table	NOUN
fuelectenerg-6011	203	2	4	4	NUM
fuelectenerg-6011	203	3	shows	show	VERB
fuelectenerg-6011	203	4	the	the	DET
fuelectenerg-6011	203	5	contrast	contrast	NOUN
fuelectenerg-6011	203	6	of	of	ADP
fuelectenerg-6011	203	7	a	a	DET
fuelectenerg-6011	203	8	few	few	ADJ
fuelectenerg-6011	203	9	main	main	ADJ
fuelectenerg-6011	203	10	properties	property	NOUN
fuelectenerg-6011	203	11	of	of	ADP
fuelectenerg-6011	203	12	high	high	ADJ
fuelectenerg-6011	203	13	-	-	PUNCT
fuelectenerg-6011	203	14	k	k	NOUN
fuelectenerg-6011	203	15	dielectric	dielectric	ADJ
fuelectenerg-6011	203	16	materials	material	NOUN
fuelectenerg-6011	203	17	[	[	X
fuelectenerg-6011	203	18	53	53	NUM
fuelectenerg-6011	203	19	]	]	PUNCT
fuelectenerg-6011	203	20	.	.	PUNCT
fuelectenerg-6011	204	1	high	high	ADJ
fuelectenerg-6011	204	2	-	-	PUNCT
fuelectenerg-6011	204	3	k	k	PROPN
fuelectenerg-6011	204	4	dielectrics	dielectric	NOUN
fuelectenerg-6011	204	5	proportionally	proportionally	ADV
fuelectenerg-6011	204	6	reduced	reduce	VERB
fuelectenerg-6011	204	7	the	the	DET
fuelectenerg-6011	204	8	electric	electric	ADJ
fuelectenerg-6011	204	9	field	field	NOUN
fuelectenerg-6011	204	10	across	across	ADP
fuelectenerg-6011	204	11	the	the	DET
fuelectenerg-6011	204	12	blocking	block	VERB
fuelectenerg-6011	204	13	oxide	oxide	NOUN
fuelectenerg-6011	204	14	with	with	ADP
fuelectenerg-6011	204	15	its	its	PRON
fuelectenerg-6011	204	16	dielectric	dielectric	ADJ
fuelectenerg-6011	204	17	constant	constant	ADJ
fuelectenerg-6011	204	18	and	and	CCONJ
fuelectenerg-6011	204	19	therefore	therefore	ADV
fuelectenerg-6011	204	20	,	,	PUNCT
fuelectenerg-6011	204	21	164	164	NUM
fuelectenerg-6011	204	22	r.	r.	PROPN
fuelectenerg-6011	204	23	rajput	rajput	PROPN
fuelectenerg-6011	204	24	,	,	PUNCT
fuelectenerg-6011	204	25	r.	r.	PROPN
fuelectenerg-6011	204	26	vaid	vaid	PROPN
fuelectenerg-6011	204	27	electron	electron	PROPN
fuelectenerg-6011	204	28	injection	injection	NOUN
fuelectenerg-6011	204	29	from	from	ADP
fuelectenerg-6011	204	30	the	the	DET
fuelectenerg-6011	204	31	gate	gate	NOUN
fuelectenerg-6011	204	32	during	during	ADP
fuelectenerg-6011	204	33	erase	erase	NOUN
fuelectenerg-6011	204	34	can	can	AUX
fuelectenerg-6011	204	35	be	be	AUX
fuelectenerg-6011	204	36	effectively	effectively	ADV
fuelectenerg-6011	204	37	suppressed	suppress	VERB
fuelectenerg-6011	204	38	which	which	PRON
fuelectenerg-6011	204	39	will	will	AUX
fuelectenerg-6011	204	40	generally	generally	ADV
fuelectenerg-6011	204	41	in	in	ADP
fuelectenerg-6011	204	42	turn	turn	NOUN
fuelectenerg-6011	204	43	enhance	enhance	VERB
fuelectenerg-6011	204	44	the	the	DET
fuelectenerg-6011	204	45	erase	erase	NOUN
fuelectenerg-6011	204	46	speed	speed	NOUN
fuelectenerg-6011	204	47	[	[	X
fuelectenerg-6011	204	48	54	54	NUM
fuelectenerg-6011	204	49	]	]	PUNCT
fuelectenerg-6011	204	50	.	.	PUNCT
fuelectenerg-6011	205	1	from	from	ADP
fuelectenerg-6011	205	2	the	the	DET
fuelectenerg-6011	205	3	above	above	ADJ
fuelectenerg-6011	205	4	discussion	discussion	NOUN
fuelectenerg-6011	205	5	it	it	PRON
fuelectenerg-6011	205	6	can	can	AUX
fuelectenerg-6011	205	7	be	be	AUX
fuelectenerg-6011	205	8	concluded	conclude	VERB
fuelectenerg-6011	205	9	that	that	SCONJ
fuelectenerg-6011	205	10	hfo2	hfo2	NOUN
fuelectenerg-6011	205	11	and	and	CCONJ
fuelectenerg-6011	205	12	its	its	PRON
fuelectenerg-6011	205	13	aluminates	aluminate	NOUN
fuelectenerg-6011	205	14	,	,	PUNCT
fuelectenerg-6011	205	15	silicates	silicate	NOUN
fuelectenerg-6011	205	16	are	be	AUX
fuelectenerg-6011	205	17	now	now	ADV
fuelectenerg-6011	205	18	the	the	DET
fuelectenerg-6011	205	19	most	most	ADV
fuelectenerg-6011	205	20	accepted	accept	VERB
fuelectenerg-6011	205	21	candidates	candidate	NOUN
fuelectenerg-6011	205	22	.	.	PUNCT
fuelectenerg-6011	206	1	chengyuan	chengyuan	PROPN
fuelectenerg-6011	206	2	yan	yan	PROPN
fuelectenerg-6011	206	3	et	et	PROPN
fuelectenerg-6011	206	4	.	.	PUNCT
fuelectenerg-6011	207	1	al	al	PROPN
fuelectenerg-6011	207	2	.	.	PUNCT
fuelectenerg-6011	208	1	[	[	X
fuelectenerg-6011	208	2	55	55	NUM
fuelectenerg-6011	208	3	]	]	PUNCT
fuelectenerg-6011	208	4	in	in	ADP
fuelectenerg-6011	208	5	2019	2019	NUM
fuelectenerg-6011	208	6	fabricated	fabricate	VERB
fuelectenerg-6011	208	7	a	a	DET
fuelectenerg-6011	208	8	nonvolatile	nonvolatile	ADJ
fuelectenerg-6011	208	9	memory	memory	NOUN
fuelectenerg-6011	208	10	with	with	ADP
fuelectenerg-6011	208	11	a	a	DET
fuelectenerg-6011	208	12	floating	float	VERB
fuelectenerg-6011	208	13	gate	gate	NOUN
fuelectenerg-6011	208	14	structure	structure	NOUN
fuelectenerg-6011	208	15	using	use	VERB
fuelectenerg-6011	208	16	znse@zns	znse@zns	PROPN
fuelectenerg-6011	208	17	core	core	NOUN
fuelectenerg-6011	208	18	–	–	PUNCT
fuelectenerg-6011	208	19	shell	shell	ADJ
fuelectenerg-6011	208	20	quantum	quantum	NOUN
fuelectenerg-6011	208	21	dots	dot	NOUN
fuelectenerg-6011	208	22	as	as	ADP
fuelectenerg-6011	208	23	discrete	discrete	ADJ
fuelectenerg-6011	208	24	charge	charge	NOUN
fuelectenerg-6011	208	25	-	-	PUNCT
fuelectenerg-6011	208	26	trapping	trap	VERB
fuelectenerg-6011	208	27	/	/	SYM
fuelectenerg-6011	208	28	tunneling	tunneling	NOUN
fuelectenerg-6011	208	29	centers	center	NOUN
fuelectenerg-6011	208	30	.	.	PUNCT
fuelectenerg-6011	209	1	the	the	DET
fuelectenerg-6011	209	2	fabricated	fabricate	VERB
fuelectenerg-6011	209	3	device	device	NOUN
fuelectenerg-6011	209	4	demonstrates	demonstrate	VERB
fuelectenerg-6011	209	5	a	a	DET
fuelectenerg-6011	209	6	large	large	ADJ
fuelectenerg-6011	209	7	memory	memory	NOUN
fuelectenerg-6011	209	8	window	window	NOUN
fuelectenerg-6011	209	9	,	,	PUNCT
fuelectenerg-6011	209	10	stable	stable	ADJ
fuelectenerg-6011	209	11	retention	retention	NOUN
fuelectenerg-6011	209	12	,	,	PUNCT
fuelectenerg-6011	209	13	and	and	CCONJ
fuelectenerg-6011	209	14	good	good	ADJ
fuelectenerg-6011	209	15	endurance	endurance	NOUN
fuelectenerg-6011	209	16	.	.	PUNCT
fuelectenerg-6011	210	1	s.	s.	PROPN
fuelectenerg-6011	210	2	wang	wang	PROPN
fuelectenerg-6011	210	3	et	et	PROPN
fuelectenerg-6011	210	4	.	.	PUNCT
fuelectenerg-6011	211	1	al	al	PROPN
fuelectenerg-6011	211	2	.	.	PUNCT
fuelectenerg-6011	212	1	[	[	X
fuelectenerg-6011	212	2	56	56	NUM
fuelectenerg-6011	212	3	]	]	PUNCT
fuelectenerg-6011	212	4	in	in	ADP
fuelectenerg-6011	212	5	2019	2019	NUM
fuelectenerg-6011	212	6	fabricated	fabricate	VERB
fuelectenerg-6011	212	7	a	a	DET
fuelectenerg-6011	212	8	dual	dual	ADJ
fuelectenerg-6011	212	9	gate	gate	NOUN
fuelectenerg-6011	212	10	structure	structure	NOUN
fuelectenerg-6011	212	11	floating	float	VERB
fuelectenerg-6011	212	12	gate	gate	NOUN
fuelectenerg-6011	212	13	non	non	ADJ
fuelectenerg-6011	212	14	–	–	PUNCT
fuelectenerg-6011	212	15	volatile	volatile	ADJ
fuelectenerg-6011	212	16	memory	memory	NOUN
fuelectenerg-6011	212	17	device	device	NOUN
fuelectenerg-6011	212	18	based	base	VERB
fuelectenerg-6011	212	19	on	on	ADP
fuelectenerg-6011	212	20	heterostructure	heterostructure	NOUN
fuelectenerg-6011	212	21	of	of	ADP
fuelectenerg-6011	212	22	mos2	mos2	NOUN
fuelectenerg-6011	212	23	and	and	CCONJ
fuelectenerg-6011	212	24	hexagonal	hexagonal	ADJ
fuelectenerg-6011	212	25	boron	boron	NOUN
fuelectenerg-6011	212	26	nitride	nitride	NOUN
fuelectenerg-6011	212	27	.	.	PUNCT
fuelectenerg-6011	213	1	the	the	DET
fuelectenerg-6011	213	2	newly	newly	ADV
fuelectenerg-6011	213	3	introduced	introduce	VERB
fuelectenerg-6011	213	4	device	device	NOUN
fuelectenerg-6011	213	5	exhibit	exhibit	VERB
fuelectenerg-6011	213	6	long	long	ADJ
fuelectenerg-6011	213	7	retention	retention	NOUN
fuelectenerg-6011	213	8	time	time	NOUN
fuelectenerg-6011	213	9	,	,	PUNCT
fuelectenerg-6011	213	10	ultra	ultra	ADJ
fuelectenerg-6011	213	11	low	low	ADJ
fuelectenerg-6011	213	12	leakage	leakage	NOUN
fuelectenerg-6011	213	13	current	current	NOUN
fuelectenerg-6011	213	14	(	(	PUNCT
fuelectenerg-6011	213	15	~10	~10	X
fuelectenerg-6011	213	16	-13	-13	PUNCT
fuelectenerg-6011	213	17	a	a	X
fuelectenerg-6011	213	18	)	)	PUNCT
fuelectenerg-6011	213	19	and	and	CCONJ
fuelectenerg-6011	213	20	low	low	ADJ
fuelectenerg-6011	213	21	operation	operation	NOUN
fuelectenerg-6011	213	22	voltage	voltage	NOUN
fuelectenerg-6011	213	23	(	(	PUNCT
fuelectenerg-6011	213	24	~5v	~5v	NOUN
fuelectenerg-6011	213	25	)	)	PUNCT
fuelectenerg-6011	213	26	.	.	PUNCT
fuelectenerg-6011	214	1	table	table	NOUN
fuelectenerg-6011	214	2	3	3	NUM
fuelectenerg-6011	214	3	work	work	NOUN
fuelectenerg-6011	214	4	function	function	NOUN
fuelectenerg-6011	214	5	values	value	NOUN
fuelectenerg-6011	214	6	of	of	ADP
fuelectenerg-6011	214	7	various	various	ADJ
fuelectenerg-6011	214	8	transition	transition	NOUN
fuelectenerg-6011	214	9	metals	metal	NOUN
fuelectenerg-6011	214	10	element	element	NOUN
fuelectenerg-6011	214	11	work	work	NOUN
fuelectenerg-6011	214	12	function	function	NOUN
fuelectenerg-6011	214	13	(	(	PUNCT
fuelectenerg-6011	214	14	ev	ev	INTJ
fuelectenerg-6011	214	15	)	)	PUNCT
fuelectenerg-6011	214	16	pt	pt	NOUN
fuelectenerg-6011	214	17	5.35	5.35	NUM
fuelectenerg-6011	214	18	au	au	PROPN
fuelectenerg-6011	214	19	5.1	5.1	NUM
fuelectenerg-6011	214	20	al	al	PROPN
fuelectenerg-6011	214	21	4.08	4.08	NUM
fuelectenerg-6011	214	22	ag	ag	PROPN
fuelectenerg-6011	214	23	4.0	4.0	NUM
fuelectenerg-6011	214	24	ti	ti	NOUN
fuelectenerg-6011	214	25	4.35	4.35	NUM
fuelectenerg-6011	214	26	cr	cr	PROPN
fuelectenerg-6011	214	27	4.5	4.5	NUM
fuelectenerg-6011	214	28	fe	fe	PROPN
fuelectenerg-6011	214	29	4.5	4.5	NUM
fuelectenerg-6011	214	30	co	co	NOUN
fuelectenerg-6011	214	31	5.0	5.0	NUM
fuelectenerg-6011	214	32	ni	ni	PROPN
fuelectenerg-6011	214	33	5.01	5.01	NUM
fuelectenerg-6011	214	34	cu	cu	PROPN
fuelectenerg-6011	214	35	4.65	4.65	NUM
fuelectenerg-6011	214	36	mg	mg	PROPN
fuelectenerg-6011	214	37	3.68	3.68	NUM
fuelectenerg-6011	214	38	nb	nb	NOUN
fuelectenerg-6011	214	39	4.3	4.3	NUM
fuelectenerg-6011	214	40	table	table	NOUN
fuelectenerg-6011	214	41	4	4	NUM
fuelectenerg-6011	214	42	comparison	comparison	NOUN
fuelectenerg-6011	214	43	of	of	ADP
fuelectenerg-6011	214	44	some	some	DET
fuelectenerg-6011	214	45	main	main	ADJ
fuelectenerg-6011	214	46	properties	property	NOUN
fuelectenerg-6011	214	47	of	of	ADP
fuelectenerg-6011	214	48	high	high	ADJ
fuelectenerg-6011	214	49	-	-	PUNCT
fuelectenerg-6011	214	50	k	k	NOUN
fuelectenerg-6011	214	51	dielectric	dielectric	ADJ
fuelectenerg-6011	214	52	material	material	NOUN
fuelectenerg-6011	214	53	[	[	X
fuelectenerg-6011	214	54	53	53	NUM
fuelectenerg-6011	214	55	]	]	PUNCT
fuelectenerg-6011	214	56	material	material	NOUN
fuelectenerg-6011	214	57	energy	energy	NOUN
fuelectenerg-6011	214	58	gap	gap	NOUN
fuelectenerg-6011	214	59	(	(	PUNCT
fuelectenerg-6011	214	60	ev	ev	NOUN
fuelectenerg-6011	214	61	)	)	PUNCT
fuelectenerg-6011	214	62	conduction	conduction	NOUN
fuelectenerg-6011	214	63	band	band	NOUN
fuelectenerg-6011	214	64	offset	offset	VERB
fuelectenerg-6011	214	65	to	to	ADP
fuelectenerg-6011	214	66	si	si	PROPN
fuelectenerg-6011	214	67	dielectric	dielectric	ADJ
fuelectenerg-6011	214	68	constant	constant	ADJ
fuelectenerg-6011	214	69	crystal	crystal	NOUN
fuelectenerg-6011	214	70	structure	structure	NOUN
fuelectenerg-6011	214	71	sio2	sio2	NOUN
fuelectenerg-6011	214	72	8.9	8.9	NUM
fuelectenerg-6011	214	73	3.2	3.2	NUM
fuelectenerg-6011	214	74	3.9	3.9	NUM
fuelectenerg-6011	214	75	amorphous	amorphous	ADJ
fuelectenerg-6011	214	76	si3n4	si3n4	PROPN
fuelectenerg-6011	214	77	5.1	5.1	NUM
fuelectenerg-6011	214	78	2	2	NUM
fuelectenerg-6011	214	79	7	7	NUM
fuelectenerg-6011	214	80	amorphous	amorphous	ADJ
fuelectenerg-6011	214	81	sion	sion	NOUN
fuelectenerg-6011	214	82	5.1	5.1	NUM
fuelectenerg-6011	214	83	-	-	SYM
fuelectenerg-6011	214	84	8.9	8.9	NUM
fuelectenerg-6011	214	85	2	2	NUM
fuelectenerg-6011	214	86	-	-	SYM
fuelectenerg-6011	214	87	3.2	3.2	NUM
fuelectenerg-6011	214	88	3.9	3.9	NUM
fuelectenerg-6011	214	89	-	-	SYM
fuelectenerg-6011	214	90	7.1	7.1	NUM
fuelectenerg-6011	214	91	amorphous	amorphous	ADJ
fuelectenerg-6011	214	92	al2o3	al2o3	PROPN
fuelectenerg-6011	214	93	8.7	8.7	NUM
fuelectenerg-6011	214	94	2.8	2.8	NUM
fuelectenerg-6011	214	95	9	9	NUM
fuelectenerg-6011	214	96	amorphous	amorphous	ADJ
fuelectenerg-6011	214	97	hfo2	hfo2	NOUN
fuelectenerg-6011	214	98	5.7	5.7	NUM
fuelectenerg-6011	214	99	1.5	1.5	NUM
fuelectenerg-6011	214	100	25	25	NUM
fuelectenerg-6011	214	101	monoclinic	monoclinic	ADJ
fuelectenerg-6011	214	102	,	,	PUNCT
fuelectenerg-6011	214	103	tetragonal	tetragonal	ADJ
fuelectenerg-6011	214	104	,	,	PUNCT
fuelectenerg-6011	214	105	cubic	cubic	ADJ
fuelectenerg-6011	214	106	zro2	zro2	PROPN
fuelectenerg-6011	214	107	7.8	7.8	NUM
fuelectenerg-6011	214	108	1.4	1.4	NUM
fuelectenerg-6011	214	109	25	25	NUM
fuelectenerg-6011	214	110	monoclinic	monoclinic	ADJ
fuelectenerg-6011	214	111	,	,	PUNCT
fuelectenerg-6011	214	112	tetragonal	tetragonal	ADJ
fuelectenerg-6011	214	113	,	,	PUNCT
fuelectenerg-6011	214	114	cubic	cubic	ADJ
fuelectenerg-6011	214	115	tio2	tio2	NOUN
fuelectenerg-6011	214	116	3.5	3.5	NUM
fuelectenerg-6011	214	117	1.2	1.2	NUM
fuelectenerg-6011	214	118	80	80	NUM
fuelectenerg-6011	214	119	tetragonal	tetragonal	ADJ
fuelectenerg-6011	214	120	ta2o5	ta2o5	PROPN
fuelectenerg-6011	214	121	4.5	4.5	NUM
fuelectenerg-6011	214	122	1	1	NUM
fuelectenerg-6011	214	123	-	-	SYM
fuelectenerg-6011	214	124	1.5	1.5	NUM
fuelectenerg-6011	214	125	26	26	NUM
fuelectenerg-6011	214	126	orthorhombic	orthorhombic	NOUN
fuelectenerg-6011	214	127	y2o3	y2o3	PROPN
fuelectenerg-6011	214	128	5.6	5.6	NUM
fuelectenerg-6011	214	129	2.3	2.3	NUM
fuelectenerg-6011	214	130	15	15	NUM
fuelectenerg-6011	214	131	cubic	cubic	ADJ
fuelectenerg-6011	214	132	la2o3	la2o3	PROPN
fuelectenerg-6011	214	133	4.3	4.3	NUM
fuelectenerg-6011	214	134	2.3	2.3	NUM
fuelectenerg-6011	214	135	30	30	NUM
fuelectenerg-6011	214	136	hexagonal	hexagonal	ADJ
fuelectenerg-6011	214	137	,	,	PUNCT
fuelectenerg-6011	214	138	cubic	cubic	ADJ
fuelectenerg-6011	214	139	flash	flash	NOUN
fuelectenerg-6011	214	140	memory	memory	NOUN
fuelectenerg-6011	214	141	devices	device	NOUN
fuelectenerg-6011	214	142	with	with	ADP
fuelectenerg-6011	214	143	metal	metal	NOUN
fuelectenerg-6011	214	144	floating	float	VERB
fuelectenerg-6011	214	145	gate	gate	NOUN
fuelectenerg-6011	214	146	/	/	SYM
fuelectenerg-6011	214	147	metal	metal	NOUN
fuelectenerg-6011	214	148	nanocrystals	nanocrystal	NOUN
fuelectenerg-6011	214	149	as	as	ADP
fuelectenerg-6011	214	150	the	the	DET
fuelectenerg-6011	214	151	charge	charge	NOUN
fuelectenerg-6011	214	152	storage	storage	NOUN
fuelectenerg-6011	214	153	layer	layer	NOUN
fuelectenerg-6011	214	154	165	165	NUM
fuelectenerg-6011	214	155	4	4	NUM
fuelectenerg-6011	214	156	.	.	PUNCT
fuelectenerg-6011	214	157	conclusion	conclusion	NOUN
fuelectenerg-6011	214	158	to	to	PART
fuelectenerg-6011	214	159	overcome	overcome	VERB
fuelectenerg-6011	214	160	the	the	DET
fuelectenerg-6011	214	161	problem	problem	NOUN
fuelectenerg-6011	214	162	of	of	ADP
fuelectenerg-6011	214	163	stored	store	VERB
fuelectenerg-6011	214	164	charge	charge	NOUN
fuelectenerg-6011	214	165	leakage	leakage	NOUN
fuelectenerg-6011	214	166	back	back	ADV
fuelectenerg-6011	214	167	to	to	ADP
fuelectenerg-6011	214	168	the	the	DET
fuelectenerg-6011	214	169	channel	channel	NOUN
fuelectenerg-6011	214	170	due	due	ADP
fuelectenerg-6011	214	171	to	to	ADP
fuelectenerg-6011	214	172	local	local	ADJ
fuelectenerg-6011	214	173	defects	defect	NOUN
fuelectenerg-6011	214	174	,	,	PUNCT
fuelectenerg-6011	214	175	memory	memory	NOUN
fuelectenerg-6011	214	176	-	-	PUNCT
fuelectenerg-6011	214	177	cell	cell	NOUN
fuelectenerg-6011	214	178	structures	structure	NOUN
fuelectenerg-6011	214	179	employing	employ	VERB
fuelectenerg-6011	214	180	discrete	discrete	ADJ
fuelectenerg-6011	214	181	traps	trap	NOUN
fuelectenerg-6011	214	182	as	as	SCONJ
fuelectenerg-6011	214	183	charge	charge	NOUN
fuelectenerg-6011	214	184	storage	storage	NOUN
fuelectenerg-6011	214	185	nodes	node	NOUN
fuelectenerg-6011	214	186	have	have	AUX
fuelectenerg-6011	214	187	been	be	AUX
fuelectenerg-6011	214	188	proposed	propose	VERB
fuelectenerg-6011	214	189	in	in	ADP
fuelectenerg-6011	214	190	the	the	DET
fuelectenerg-6011	214	191	past	past	ADJ
fuelectenerg-6011	214	192	few	few	ADJ
fuelectenerg-6011	214	193	years	year	NOUN
fuelectenerg-6011	214	194	.	.	PUNCT
fuelectenerg-6011	215	1	extensive	extensive	ADJ
fuelectenerg-6011	215	2	researches	research	NOUN
fuelectenerg-6011	215	3	have	have	AUX
fuelectenerg-6011	215	4	been	be	AUX
fuelectenerg-6011	215	5	conducted	conduct	VERB
fuelectenerg-6011	215	6	on	on	ADP
fuelectenerg-6011	215	7	non	non	ADJ
fuelectenerg-6011	215	8	volatile	volatile	ADJ
fuelectenerg-6011	215	9	memories	memory	NOUN
fuelectenerg-6011	215	10	employing	employ	VERB
fuelectenerg-6011	215	11	metal	metal	NOUN
fuelectenerg-6011	215	12	nanocrystals	nanocrystal	NOUN
fuelectenerg-6011	215	13	/	/	SYM
fuelectenerg-6011	215	14	metal	metal	NOUN
fuelectenerg-6011	215	15	floating	float	VERB
fuelectenerg-6011	215	16	gate	gate	NOUN
fuelectenerg-6011	215	17	.	.	PUNCT
fuelectenerg-6011	216	1	metal	metal	NOUN
fuelectenerg-6011	216	2	floating	float	VERB
fuelectenerg-6011	216	3	gate	gate	NOUN
fuelectenerg-6011	216	4	in	in	ADP
fuelectenerg-6011	216	5	combination	combination	NOUN
fuelectenerg-6011	216	6	with	with	ADP
fuelectenerg-6011	216	7	high	high	ADJ
fuelectenerg-6011	216	8	-	-	PUNCT
fuelectenerg-6011	216	9	k	k	NOUN
fuelectenerg-6011	216	10	results	result	NOUN
fuelectenerg-6011	216	11	in	in	ADP
fuelectenerg-6011	216	12	good	good	ADJ
fuelectenerg-6011	216	13	electrical	electrical	ADJ
fuelectenerg-6011	216	14	characteristics	characteristic	NOUN
fuelectenerg-6011	216	15	even	even	ADV
fuelectenerg-6011	216	16	at	at	ADP
fuelectenerg-6011	216	17	low	low	ADJ
fuelectenerg-6011	216	18	thicknesses	thickness	NOUN
fuelectenerg-6011	216	19	and	and	CCONJ
fuelectenerg-6011	216	20	also	also	ADV
fuelectenerg-6011	216	21	lowers	lower	VERB
fuelectenerg-6011	216	22	the	the	DET
fuelectenerg-6011	216	23	interpoly	interpoly	NOUN
fuelectenerg-6011	216	24	dielectric	dielectric	ADJ
fuelectenerg-6011	216	25	leakage	leakage	NOUN
fuelectenerg-6011	216	26	(	(	PUNCT
fuelectenerg-6011	216	27	ipd	ipd	PROPN
fuelectenerg-6011	216	28	)	)	PUNCT
fuelectenerg-6011	216	29	due	due	ADP
fuelectenerg-6011	216	30	to	to	ADP
fuelectenerg-6011	216	31	larger	large	ADJ
fuelectenerg-6011	216	32	work	work	NOUN
fuelectenerg-6011	216	33	function	function	NOUN
fuelectenerg-6011	216	34	.	.	PUNCT
fuelectenerg-6011	217	1	the	the	DET
fuelectenerg-6011	217	2	metal	metal	NOUN
fuelectenerg-6011	217	3	nanocrystal	nanocrystal	ADJ
fuelectenerg-6011	217	4	with	with	ADP
fuelectenerg-6011	217	5	high	high	ADJ
fuelectenerg-6011	217	6	work	work	NOUN
fuelectenerg-6011	217	7	function	function	NOUN
fuelectenerg-6011	217	8	shows	show	VERB
fuelectenerg-6011	217	9	enhanced	enhance	VERB
fuelectenerg-6011	217	10	charge	charge	NOUN
fuelectenerg-6011	217	11	retention	retention	NOUN
fuelectenerg-6011	217	12	time	time	NOUN
fuelectenerg-6011	217	13	as	as	SCONJ
fuelectenerg-6011	217	14	compared	compare	VERB
fuelectenerg-6011	217	15	to	to	ADP
fuelectenerg-6011	217	16	semiconductor	semiconductor	NOUN
fuelectenerg-6011	217	17	nanocrystals	nanocrystal	NOUN
fuelectenerg-6011	217	18	and	and	CCONJ
fuelectenerg-6011	217	19	thus	thus	ADV
fuelectenerg-6011	217	20	the	the	DET
fuelectenerg-6011	217	21	high	high	ADJ
fuelectenerg-6011	217	22	potentiality	potentiality	NOUN
fuelectenerg-6011	217	23	of	of	ADP
fuelectenerg-6011	217	24	nanocrystals	nanocrystal	NOUN
fuelectenerg-6011	217	25	for	for	ADP
fuelectenerg-6011	217	26	nvm	nvm	NOUN
fuelectenerg-6011	217	27	applications	application	NOUN
fuelectenerg-6011	217	28	is	be	AUX
fuelectenerg-6011	217	29	confirmed	confirm	VERB
fuelectenerg-6011	217	30	.	.	PUNCT
fuelectenerg-6011	218	1	the	the	DET
fuelectenerg-6011	218	2	advantages	advantage	NOUN
fuelectenerg-6011	218	3	of	of	ADP
fuelectenerg-6011	218	4	both	both	DET
fuelectenerg-6011	218	5	metal	metal	NOUN
fuelectenerg-6011	218	6	nc	nc	PROPN
fuelectenerg-6011	218	7	and	and	CCONJ
fuelectenerg-6011	218	8	a	a	DET
fuelectenerg-6011	218	9	high	high	ADJ
fuelectenerg-6011	218	10	-	-	PUNCT
fuelectenerg-6011	218	11	tunneling	tunnel	VERB
fuelectenerg-6011	218	12	barrier	barrier	NOUN
fuelectenerg-6011	218	13	results	result	NOUN
fuelectenerg-6011	218	14	in	in	ADP
fuelectenerg-6011	218	15	excellent	excellent	ADJ
fuelectenerg-6011	218	16	data	datum	NOUN
fuelectenerg-6011	218	17	retention	retention	NOUN
fuelectenerg-6011	218	18	characteristic	characteristic	ADJ
fuelectenerg-6011	218	19	without	without	ADP
fuelectenerg-6011	218	20	compromising	compromise	VERB
fuelectenerg-6011	218	21	the	the	DET
fuelectenerg-6011	218	22	programming	programming	NOUN
fuelectenerg-6011	218	23	efficiency	efficiency	NOUN
fuelectenerg-6011	218	24	and	and	CCONJ
fuelectenerg-6011	218	25	it	it	PRON
fuelectenerg-6011	218	26	resolve	resolve	VERB
fuelectenerg-6011	218	27	the	the	DET
fuelectenerg-6011	218	28	tradeoff	tradeoff	NOUN
fuelectenerg-6011	218	29	between	between	ADP
fuelectenerg-6011	218	30	programming	programming	NOUN
fuelectenerg-6011	218	31	and	and	CCONJ
fuelectenerg-6011	218	32	retention	retention	NOUN
fuelectenerg-6011	218	33	characteristic	characteristic	NOUN
fuelectenerg-6011	218	34	.	.	PUNCT
fuelectenerg-6011	219	1	the	the	DET
fuelectenerg-6011	219	2	heterogeneous	heterogeneous	ADJ
fuelectenerg-6011	219	3	floating	float	VERB
fuelectenerg-6011	219	4	-	-	PUNCT
fuelectenerg-6011	219	5	gate	gate	NOUN
fuelectenerg-6011	219	6	stack	stack	NOUN
fuelectenerg-6011	219	7	of	of	ADP
fuelectenerg-6011	219	8	metal	metal	NOUN
fuelectenerg-6011	219	9	nanocrystals	nanocrystal	NOUN
fuelectenerg-6011	219	10	and	and	CCONJ
fuelectenerg-6011	219	11	nitride	nitride	NOUN
fuelectenerg-6011	219	12	can	can	AUX
fuelectenerg-6011	219	13	take	take	VERB
fuelectenerg-6011	219	14	the	the	DET
fuelectenerg-6011	219	15	better	well	ADJ
fuelectenerg-6011	219	16	tradeoff	tradeoff	NOUN
fuelectenerg-6011	219	17	between	between	ADP
fuelectenerg-6011	219	18	the	the	DET
fuelectenerg-6011	219	19	programming	programming	NOUN
fuelectenerg-6011	219	20	and	and	CCONJ
fuelectenerg-6011	219	21	retention	retention	NOUN
fuelectenerg-6011	219	22	characteristics	characteristic	NOUN
fuelectenerg-6011	219	23	as	as	SCONJ
fuelectenerg-6011	219	24	compared	compare	VERB
fuelectenerg-6011	219	25	to	to	ADP
fuelectenerg-6011	219	26	single	single	ADJ
fuelectenerg-6011	219	27	layer	layer	NOUN
fuelectenerg-6011	219	28	of	of	ADP
fuelectenerg-6011	219	29	metal	metal	NOUN
fuelectenerg-6011	219	30	nanocrystals	nanocrystal	NOUN
fuelectenerg-6011	219	31	or	or	CCONJ
fuelectenerg-6011	219	32	nitride	nitride	NOUN
fuelectenerg-6011	219	33	.	.	PUNCT
fuelectenerg-6011	220	1	the	the	DET
fuelectenerg-6011	220	2	multilayer	multilayer	ADJ
fuelectenerg-6011	220	3	nanoparticle	nanoparticle	NOUN
fuelectenerg-6011	220	4	embedded	embed	VERB
fuelectenerg-6011	220	5	nonvolatile	nonvolatile	ADJ
fuelectenerg-6011	220	6	memory	memory	NOUN
fuelectenerg-6011	220	7	contributes	contribute	VERB
fuelectenerg-6011	220	8	to	to	ADP
fuelectenerg-6011	220	9	additional	additional	ADJ
fuelectenerg-6011	220	10	charge	charge	NOUN
fuelectenerg-6011	220	11	storage	storage	NOUN
fuelectenerg-6011	220	12	capability	capability	NOUN
fuelectenerg-6011	220	13	and	and	CCONJ
fuelectenerg-6011	220	14	ultimately	ultimately	ADV
fuelectenerg-6011	220	15	enhanced	enhance	VERB
fuelectenerg-6011	220	16	memory	memory	NOUN
fuelectenerg-6011	220	17	window	window	NOUN
fuelectenerg-6011	220	18	.	.	PUNCT
fuelectenerg-6011	221	1	the	the	DET
fuelectenerg-6011	221	2	high	high	ADJ
fuelectenerg-6011	221	3	-	-	PUNCT
fuelectenerg-6011	221	4	k	k	NOUN
fuelectenerg-6011	221	5	blocking	block	VERB
fuelectenerg-6011	221	6	oxide	oxide	NOUN
fuelectenerg-6011	221	7	play	play	VERB
fuelectenerg-6011	221	8	vital	vital	ADJ
fuelectenerg-6011	221	9	role	role	NOUN
fuelectenerg-6011	221	10	in	in	ADP
fuelectenerg-6011	221	11	the	the	DET
fuelectenerg-6011	221	12	low	low	ADJ
fuelectenerg-6011	221	13	-	-	PUNCT
fuelectenerg-6011	221	14	voltage	voltage	NOUN
fuelectenerg-6011	221	15	operation	operation	NOUN
fuelectenerg-6011	221	16	and	and	CCONJ
fuelectenerg-6011	221	17	increases	increase	VERB
fuelectenerg-6011	221	18	the	the	DET
fuelectenerg-6011	221	19	coupling	coupling	NOUN
fuelectenerg-6011	221	20	ratio	ratio	NOUN
fuelectenerg-6011	221	21	between	between	ADP
fuelectenerg-6011	221	22	the	the	DET
fuelectenerg-6011	221	23	control	control	NOUN
fuelectenerg-6011	221	24	gate	gate	NOUN
fuelectenerg-6011	221	25	and	and	CCONJ
fuelectenerg-6011	221	26	metal	metal	NOUN
fuelectenerg-6011	221	27	floating	float	VERB
fuelectenerg-6011	221	28	gate/	gate/	NUM
fuelectenerg-6011	221	29	metal	metal	NOUN
fuelectenerg-6011	221	30	nc	nc	NOUN
fuelectenerg-6011	221	31	layer	layer	NOUN
fuelectenerg-6011	221	32	which	which	PRON
fuelectenerg-6011	221	33	results	result	VERB
fuelectenerg-6011	221	34	in	in	ADP
fuelectenerg-6011	221	35	good	good	ADJ
fuelectenerg-6011	221	36	charge	charge	NOUN
fuelectenerg-6011	221	37	storage	storage	NOUN
fuelectenerg-6011	221	38	feature	feature	NOUN
fuelectenerg-6011	221	39	.	.	PUNCT
fuelectenerg-6011	222	1	however	however	ADV
fuelectenerg-6011	222	2	with	with	ADP
fuelectenerg-6011	222	3	decrease	decrease	NOUN
fuelectenerg-6011	222	4	in	in	ADP
fuelectenerg-6011	222	5	nanocrystal	nanocrystal	ADJ
fuelectenerg-6011	222	6	size	size	NOUN
fuelectenerg-6011	222	7	the	the	DET
fuelectenerg-6011	222	8	density	density	NOUN
fuelectenerg-6011	222	9	of	of	ADP
fuelectenerg-6011	222	10	nanocrystals	nanocrystal	NOUN
fuelectenerg-6011	222	11	increases	increase	NOUN
fuelectenerg-6011	223	1	but	but	CCONJ
fuelectenerg-6011	223	2	it	it	PRON
fuelectenerg-6011	223	3	also	also	ADV
fuelectenerg-6011	223	4	faces	face	VERB
fuelectenerg-6011	223	5	some	some	DET
fuelectenerg-6011	223	6	limitations	limitation	NOUN
fuelectenerg-6011	223	7	such	such	ADJ
fuelectenerg-6011	223	8	as	as	ADP
fuelectenerg-6011	223	9	high	high	ADJ
fuelectenerg-6011	223	10	leakage	leakage	NOUN
fuelectenerg-6011	223	11	density	density	NOUN
fuelectenerg-6011	223	12	and	and	CCONJ
fuelectenerg-6011	223	13	fluctuation	fluctuation	NOUN
fuelectenerg-6011	223	14	from	from	ADP
fuelectenerg-6011	223	15	device	device	NOUN
fuelectenerg-6011	223	16	to	to	ADP
fuelectenerg-6011	223	17	device	device	NOUN
fuelectenerg-6011	223	18	and	and	CCONJ
fuelectenerg-6011	223	19	isolation	isolation	NOUN
fuelectenerg-6011	223	20	concept	concept	NOUN
fuelectenerg-6011	223	21	is	be	AUX
fuelectenerg-6011	223	22	violated	violate	VERB
fuelectenerg-6011	223	23	.	.	PUNCT
fuelectenerg-6011	224	1	therefore	therefore	ADV
fuelectenerg-6011	224	2	,	,	PUNCT
fuelectenerg-6011	224	3	it	it	PRON
fuelectenerg-6011	224	4	is	be	AUX
fuelectenerg-6011	224	5	indispensable	indispensable	ADJ
fuelectenerg-6011	224	6	to	to	PART
fuelectenerg-6011	224	7	solve	solve	VERB
fuelectenerg-6011	224	8	the	the	DET
fuelectenerg-6011	224	9	scaling	scaling	ADJ
fuelectenerg-6011	224	10	problem	problem	NOUN
fuelectenerg-6011	224	11	with	with	ADP
fuelectenerg-6011	224	12	suitable	suitable	ADJ
fuelectenerg-6011	224	13	requirements	requirement	NOUN
fuelectenerg-6011	224	14	in	in	ADP
fuelectenerg-6011	224	15	nonvolatile	nonvolatile	ADJ
fuelectenerg-6011	224	16	memory	memory	NOUN
fuelectenerg-6011	224	17	industry	industry	NOUN
fuelectenerg-6011	224	18	.	.	PUNCT
fuelectenerg-6011	225	1	acknowledgement	acknowledgement	NOUN
fuelectenerg-6011	225	2	:	:	PUNCT
fuelectenerg-6011	225	3	the	the	DET
fuelectenerg-6011	225	4	author	author	NOUN
fuelectenerg-6011	225	5	renu	renu	PROPN
fuelectenerg-6011	225	6	organized	organize	VERB
fuelectenerg-6011	225	7	the	the	DET
fuelectenerg-6011	225	8	concept	concept	NOUN
fuelectenerg-6011	225	9	of	of	ADP
fuelectenerg-6011	225	10	this	this	DET
fuelectenerg-6011	225	11	review	review	NOUN
fuelectenerg-6011	225	12	paper	paper	NOUN
fuelectenerg-6011	225	13	and	and	CCONJ
fuelectenerg-6011	225	14	would	would	AUX
fuelectenerg-6011	225	15	like	like	VERB
fuelectenerg-6011	225	16	to	to	PART
fuelectenerg-6011	225	17	thank	thank	VERB
fuelectenerg-6011	225	18	prof	prof	PROPN
fuelectenerg-6011	225	19	.	.	PUNCT
fuelectenerg-6011	226	1	rakesh	rakesh	PROPN
fuelectenerg-6011	226	2	vaid	vaid	PROPN
fuelectenerg-6011	226	3	for	for	ADP
fuelectenerg-6011	226	4	supervising	supervise	VERB
fuelectenerg-6011	226	5	the	the	DET
fuelectenerg-6011	226	6	project	project	NOUN
fuelectenerg-6011	226	7	.	.	PUNCT
fuelectenerg-6011	227	1	both	both	CCONJ
fuelectenerg-6011	227	2	the	the	DET
fuelectenerg-6011	227	3	authors	author	NOUN
fuelectenerg-6011	227	4	read	read	VERB
fuelectenerg-6011	227	5	and	and	CCONJ
fuelectenerg-6011	227	6	approved	approve	VERB
fuelectenerg-6011	227	7	the	the	DET
fuelectenerg-6011	227	8	final	final	ADJ
fuelectenerg-6011	227	9	manuscript	manuscript	NOUN
fuelectenerg-6011	227	10	.	.	PUNCT
fuelectenerg-6011	228	1	references	reference	NOUN
fuelectenerg-6011	228	2	[	[	X
fuelectenerg-6011	228	3	1	1	NUM
fuelectenerg-6011	228	4	]	]	X
fuelectenerg-6011	228	5	r.	r.	PROPN
fuelectenerg-6011	228	6	bez	bez	PROPN
fuelectenerg-6011	228	7	,	,	PUNCT
fuelectenerg-6011	228	8	e.	e.	PROPN
fuelectenerg-6011	228	9	camerlenghi	camerlenghi	PROPN
fuelectenerg-6011	228	10	,	,	PUNCT
fuelectenerg-6011	228	11	a.	a.	PROPN
fuelectenerg-6011	228	12	modelli	modelli	PROPN
fuelectenerg-6011	228	13	and	and	CCONJ
fuelectenerg-6011	228	14	a.	a.	PROPN
fuelectenerg-6011	228	15	visconti	visconti	PROPN
fuelectenerg-6011	228	16	,	,	PUNCT
fuelectenerg-6011	228	17	“	"	PUNCT
fuelectenerg-6011	228	18	introduction	introduction	NOUN
fuelectenerg-6011	228	19	to	to	PART
fuelectenerg-6011	228	20	flash	flash	VERB
fuelectenerg-6011	228	21	memory	memory	NOUN
fuelectenerg-6011	228	22	”	"	PUNCT
fuelectenerg-6011	228	23	,	,	PUNCT
fuelectenerg-6011	228	24	in	in	ADP
fuelectenerg-6011	228	25	proceedings	proceeding	NOUN
fuelectenerg-6011	228	26	of	of	ADP
fuelectenerg-6011	228	27	the	the	DET
fuelectenerg-6011	228	28	ieee	ieee	NOUN
fuelectenerg-6011	228	29	,	,	PUNCT
fuelectenerg-6011	228	30	2003	2003	NUM
fuelectenerg-6011	228	31	,	,	PUNCT
fuelectenerg-6011	228	32	vol	vol	NOUN
fuelectenerg-6011	228	33	.	.	PROPN
fuelectenerg-6011	228	34	91	91	NUM
fuelectenerg-6011	228	35	,	,	PUNCT
fuelectenerg-6011	228	36	pp	pp	ADJ
fuelectenerg-6011	228	37	.	.	PUNCT
fuelectenerg-6011	229	1	489–502	489–502	NUM
fuelectenerg-6011	229	2	.	.	PUNCT
fuelectenerg-6011	230	1	[	[	X
fuelectenerg-6011	230	2	2	2	X
fuelectenerg-6011	230	3	]	]	PUNCT
fuelectenerg-6011	230	4	http://www.itrs.net/links/2009itrs/home2009.htm	http://www.itrs.net/links/2009itrs/home2009.htm	PUNCT
fuelectenerg-6011	231	1	[	[	X
fuelectenerg-6011	231	2	3	3	NUM
fuelectenerg-6011	231	3	]	]	X
fuelectenerg-6011	231	4	r.	r.	PROPN
fuelectenerg-6011	231	5	garg	garg	PROPN
fuelectenerg-6011	231	6	,	,	PUNCT
fuelectenerg-6011	231	7	d.	d.	PROPN
fuelectenerg-6011	231	8	misra	misra	PROPN
fuelectenerg-6011	231	9	and	and	CCONJ
fuelectenerg-6011	232	1	p.	p.	PROPN
fuelectenerg-6011	232	2	k.	k.	PROPN
fuelectenerg-6011	232	3	swain	swain	PROPN
fuelectenerg-6011	232	4	,	,	PUNCT
fuelectenerg-6011	232	5	“	"	PUNCT
fuelectenerg-6011	232	6	ge	ge	PROPN
fuelectenerg-6011	232	7	mos	mos	PROPN
fuelectenerg-6011	232	8	capacitors	capacitor	NOUN
fuelectenerg-6011	232	9	with	with	ADP
fuelectenerg-6011	232	10	thermally	thermally	ADV
fuelectenerg-6011	232	11	evaporated	evaporate	VERB
fuelectenerg-6011	232	12	hfo2	hfo2	NOUN
fuelectenerg-6011	232	13	as	as	ADP
fuelectenerg-6011	232	14	gate	gate	NOUN
fuelectenerg-6011	232	15	dielectric	dielectric	NOUN
fuelectenerg-6011	232	16	”	"	PUNCT
fuelectenerg-6011	232	17	,	,	PUNCT
fuelectenerg-6011	232	18	j.	j.	PROPN
fuelectenerg-6011	232	19	of	of	ADP
fuelectenerg-6011	232	20	the	the	DET
fuelectenerg-6011	232	21	electrochem	electrochem	PROPN
fuelectenerg-6011	232	22	.	.	PUNCT
fuelectenerg-6011	233	1	soc	soc	PROPN
fuelectenerg-6011	233	2	.	.	PUNCT
fuelectenerg-6011	233	3	,	,	PUNCT
fuelectenerg-6011	233	4	vol	vol	NOUN
fuelectenerg-6011	233	5	.	.	PROPN
fuelectenerg-6011	233	6	153	153	NUM
fuelectenerg-6011	233	7	,	,	PUNCT
fuelectenerg-6011	233	8	pp	pp	PROPN
fuelectenerg-6011	233	9	.	.	PUNCT
fuelectenerg-6011	234	1	f29	f29	PROPN
fuelectenerg-6011	234	2	–	–	PUNCT
fuelectenerg-6011	234	3	f34	f34	NOUN
fuelectenerg-6011	234	4	,	,	PUNCT
fuelectenerg-6011	234	5	2006	2006	NUM
fuelectenerg-6011	234	6	.	.	PUNCT
fuelectenerg-6011	235	1	[	[	X
fuelectenerg-6011	235	2	4	4	NUM
fuelectenerg-6011	235	3	]	]	PUNCT
fuelectenerg-6011	235	4	a.	a.	NOUN
fuelectenerg-6011	235	5	g.	g.	PROPN
fuelectenerg-6011	235	6	khairnar	khairnar	PROPN
fuelectenerg-6011	235	7	and	and	CCONJ
fuelectenerg-6011	235	8	a.	a.	PROPN
fuelectenerg-6011	235	9	m.	m.	PROPN
fuelectenerg-6011	235	10	mahajan	mahajan	PROPN
fuelectenerg-6011	235	11	,	,	PUNCT
fuelectenerg-6011	235	12	“	"	PUNCT
fuelectenerg-6011	235	13	effect	effect	NOUN
fuelectenerg-6011	235	14	of	of	ADP
fuelectenerg-6011	235	15	post	post	ADJ
fuelectenerg-6011	235	16	-	-	ADJ
fuelectenerg-6011	235	17	deposition	deposition	ADJ
fuelectenerg-6011	235	18	annealing	anneal	VERB
fuelectenerg-6011	235	19	temperature	temperature	NOUN
fuelectenerg-6011	235	20	on	on	ADP
fuelectenerg-6011	235	21	rf	rf	ADJ
fuelectenerg-6011	235	22	-	-	PUNCT
fuelectenerg-6011	235	23	sputtered	sputter	VERB
fuelectenerg-6011	235	24	hfo2	hfo2	NOUN
fuelectenerg-6011	235	25	thin	thin	ADJ
fuelectenerg-6011	235	26	film	film	NOUN
fuelectenerg-6011	235	27	for	for	ADP
fuelectenerg-6011	235	28	advanced	advanced	ADJ
fuelectenerg-6011	235	29	cmos	cmos	PROPN
fuelectenerg-6011	235	30	technology	technology	NOUN
fuelectenerg-6011	235	31	”	"	PUNCT
fuelectenerg-6011	235	32	,	,	PUNCT
fuelectenerg-6011	235	33	solid	solid	ADJ
fuelectenerg-6011	235	34	state	state	PROPN
fuelectenerg-6011	235	35	sci	sci	PROPN
fuelectenerg-6011	235	36	.	.	PROPN
fuelectenerg-6011	235	37	,	,	PUNCT
fuelectenerg-6011	235	38	vol	vol	NOUN
fuelectenerg-6011	235	39	.	.	PROPN
fuelectenerg-6011	235	40	15	15	NUM
fuelectenerg-6011	235	41	,	,	PUNCT
fuelectenerg-6011	235	42	pp	pp	ADJ
fuelectenerg-6011	235	43	.	.	PUNCT
fuelectenerg-6011	236	1	24–28	24–28	NUM
fuelectenerg-6011	236	2	,	,	PUNCT
fuelectenerg-6011	236	3	2013	2013	NUM
fuelectenerg-6011	236	4	.	.	PUNCT
fuelectenerg-6011	237	1	[	[	X
fuelectenerg-6011	237	2	5	5	X
fuelectenerg-6011	237	3	]	]	PUNCT
fuelectenerg-6011	237	4	h.	h.	PROPN
fuelectenerg-6011	237	5	s.	s.	PROPN
fuelectenerg-6011	237	6	kim	kim	PROPN
fuelectenerg-6011	237	7	,	,	PUNCT
fuelectenerg-6011	237	8	“	"	PUNCT
fuelectenerg-6011	237	9	a	a	DET
fuelectenerg-6011	237	10	study	study	NOUN
fuelectenerg-6011	237	11	of	of	ADP
fuelectenerg-6011	237	12	hfo2	hfo2	NOUN
fuelectenerg-6011	237	13	-	-	PUNCT
fuelectenerg-6011	237	14	based	base	VERB
fuelectenerg-6011	237	15	moscaps	moscap	NOUN
fuelectenerg-6011	237	16	and	and	CCONJ
fuelectenerg-6011	237	17	mosfets	mosfet	NOUN
fuelectenerg-6011	237	18	on	on	ADP
fuelectenerg-6011	237	19	iii	iii	NOUN
fuelectenerg-6011	237	20	-	-	PUNCT
fuelectenerg-6011	237	21	v	v	NOUN
fuelectenerg-6011	237	22	substrates	substrate	NOUN
fuelectenerg-6011	237	23	with	with	ADP
fuelectenerg-6011	237	24	a	a	DET
fuelectenerg-6011	237	25	thin	thin	ADJ
fuelectenerg-6011	237	26	germanium	germanium	NOUN
fuelectenerg-6011	237	27	interfacial	interfacial	ADJ
fuelectenerg-6011	237	28	passivation	passivation	NOUN
fuelectenerg-6011	237	29	layer	layer	NOUN
fuelectenerg-6011	237	30	”	"	PUNCT
fuelectenerg-6011	237	31	,	,	PUNCT
fuelectenerg-6011	237	32	ph.d	ph.d	PROPN
fuelectenerg-6011	237	33	.	.	PUNCT
fuelectenerg-6011	238	1	thesis	thesis	PROPN
fuelectenerg-6011	238	2	,	,	PUNCT
fuelectenerg-6011	238	3	the	the	DET
fuelectenerg-6011	238	4	university	university	PROPN
fuelectenerg-6011	238	5	of	of	ADP
fuelectenerg-6011	238	6	texas	texas	PROPN
fuelectenerg-6011	238	7	,	,	PUNCT
fuelectenerg-6011	238	8	austin	austin	PROPN
fuelectenerg-6011	238	9	,	,	PUNCT
fuelectenerg-6011	238	10	2008	2008	NUM
fuelectenerg-6011	238	11	.	.	PUNCT
fuelectenerg-6011	239	1	[	[	X
fuelectenerg-6011	239	2	6	6	NUM
fuelectenerg-6011	239	3	]	]	PUNCT
fuelectenerg-6011	239	4	s.	s.	PROPN
fuelectenerg-6011	239	5	v.	v.	PROPN
fuelectenerg-6011	239	6	j.	j.	PROPN
fuelectenerg-6011	239	7	chandra	chandra	PROPN
fuelectenerg-6011	239	8	,	,	PUNCT
fuelectenerg-6011	239	9	m.	m.	PROPN
fuelectenerg-6011	239	10	jeong	jeong	PROPN
fuelectenerg-6011	239	11	,	,	PUNCT
fuelectenerg-6011	239	12	y.	y.	PROPN
fuelectenerg-6011	239	13	c.	c.	PROPN
fuelectenerg-6011	239	14	park	park	PROPN
fuelectenerg-6011	239	15	,	,	PUNCT
fuelectenerg-6011	239	16	j.	j.	PROPN
fuelectenerg-6011	239	17	w.	w.	PROPN
fuelectenerg-6011	239	18	yoon	yoon	PROPN
fuelectenerg-6011	239	19	and	and	CCONJ
fuelectenerg-6011	239	20	c.	c.	PROPN
fuelectenerg-6011	239	21	j.	j.	PROPN
fuelectenerg-6011	239	22	choi	choi	PROPN
fuelectenerg-6011	239	23	,	,	PUNCT
fuelectenerg-6011	239	24	“	"	PUNCT
fuelectenerg-6011	239	25	effect	effect	NOUN
fuelectenerg-6011	239	26	of	of	ADP
fuelectenerg-6011	239	27	annealing	anneal	VERB
fuelectenerg-6011	239	28	ambient	ambient	NOUN
fuelectenerg-6011	239	29	on	on	ADP
fuelectenerg-6011	239	30	structural	structural	ADJ
fuelectenerg-6011	239	31	and	and	CCONJ
fuelectenerg-6011	239	32	electrical	electrical	ADJ
fuelectenerg-6011	239	33	properties	property	NOUN
fuelectenerg-6011	239	34	of	of	ADP
fuelectenerg-6011	239	35	ge	ge	PROPN
fuelectenerg-6011	239	36	metal	metal	NOUN
fuelectenerg-6011	239	37	-	-	PUNCT
fuelectenerg-6011	239	38	oxide	oxide	NOUN
fuelectenerg-6011	239	39	-	-	PUNCT
fuelectenerg-6011	239	40	semiconductor	semiconductor	NOUN
fuelectenerg-6011	239	41	capacitors	capacitor	NOUN
fuelectenerg-6011	239	42	with	with	ADP
fuelectenerg-6011	239	43	pt	pt	PROPN
fuelectenerg-6011	239	44	gate	gate	PROPN
fuelectenerg-6011	239	45	electrode	electrode	PROPN
fuelectenerg-6011	239	46	and	and	CCONJ
fuelectenerg-6011	239	47	hfo2	hfo2	PROPN
fuelectenerg-6011	239	48	gate	gate	NOUN
fuelectenerg-6011	239	49	dielectric	dielectric	NOUN
fuelectenerg-6011	239	50	”	"	PUNCT
fuelectenerg-6011	239	51	,	,	PUNCT
fuelectenerg-6011	239	52	mater	mater	NOUN
fuelectenerg-6011	239	53	.	.	PUNCT
fuelectenerg-6011	240	1	trans	trans	PROPN
fuelectenerg-6011	240	2	.	.	PROPN
fuelectenerg-6011	240	3	,	,	PUNCT
fuelectenerg-6011	240	4	vol	vol	NOUN
fuelectenerg-6011	240	5	.	.	PROPN
fuelectenerg-6011	241	1	52	52	NUM
fuelectenerg-6011	241	2	,	,	PUNCT
fuelectenerg-6011	241	3	pp	pp	ADJ
fuelectenerg-6011	241	4	.	.	PUNCT
fuelectenerg-6011	242	1	118–123	118–123	NUM
fuelectenerg-6011	242	2	,	,	PUNCT
fuelectenerg-6011	242	3	2011	2011	NUM
fuelectenerg-6011	242	4	.	.	PUNCT
fuelectenerg-6011	243	1	[	[	X
fuelectenerg-6011	243	2	7	7	X
fuelectenerg-6011	243	3	]	]	X
fuelectenerg-6011	243	4	m.	m.	NOUN
fuelectenerg-6011	243	5	saitoh	saitoh	PROPN
fuelectenerg-6011	243	6	,	,	PUNCT
fuelectenerg-6011	243	7	e.	e.	PROPN
fuelectenerg-6011	243	8	nagata	nagata	PROPN
fuelectenerg-6011	243	9	and	and	CCONJ
fuelectenerg-6011	243	10	t.	t.	PROPN
fuelectenerg-6011	243	11	hiramoto	hiramoto	NOUN
fuelectenerg-6011	243	12	,	,	PUNCT
fuelectenerg-6011	243	13	“	"	PUNCT
fuelectenerg-6011	243	14	effects	effect	NOUN
fuelectenerg-6011	243	15	of	of	ADP
fuelectenerg-6011	243	16	ultra	ultra	ADJ
fuelectenerg-6011	243	17	-	-	ADJ
fuelectenerg-6011	243	18	narrow	narrow	ADJ
fuelectenerg-6011	243	19	channel	channel	NOUN
fuelectenerg-6011	243	20	on	on	ADP
fuelectenerg-6011	243	21	characteristics	characteristic	NOUN
fuelectenerg-6011	243	22	of	of	ADP
fuelectenerg-6011	243	23	mosfet	mosfet	ADJ
fuelectenerg-6011	243	24	memory	memory	NOUN
fuelectenerg-6011	243	25	with	with	ADP
fuelectenerg-6011	243	26	silicon	silicon	NOUN
fuelectenerg-6011	243	27	nanocrystal	nanocrystal	ADJ
fuelectenerg-6011	243	28	floating	float	VERB
fuelectenerg-6011	243	29	gates	gate	NOUN
fuelectenerg-6011	243	30	”	"	PUNCT
fuelectenerg-6011	243	31	,	,	PUNCT
fuelectenerg-6011	243	32	in	in	ADP
fuelectenerg-6011	243	33	proceedings	proceeding	NOUN
fuelectenerg-6011	243	34	of	of	ADP
fuelectenerg-6011	243	35	international	international	ADJ
fuelectenerg-6011	243	36	electron	electron	NOUN
fuelectenerg-6011	243	37	devices	device	NOUN
fuelectenerg-6011	243	38	meeting	meet	VERB
fuelectenerg-6011	243	39	technical	technical	ADJ
fuelectenerg-6011	243	40	digest	digest	NOUN
fuelectenerg-6011	243	41	,	,	PUNCT
fuelectenerg-6011	243	42	2002	2002	NUM
fuelectenerg-6011	243	43	,	,	PUNCT
fuelectenerg-6011	243	44	pp	pp	ADJ
fuelectenerg-6011	243	45	.	.	PUNCT
fuelectenerg-6011	244	1	181–184	181–184	NUM
fuelectenerg-6011	244	2	.	.	PUNCT
fuelectenerg-6011	245	1	[	[	X
fuelectenerg-6011	245	2	8	8	NUM
fuelectenerg-6011	245	3	]	]	X
fuelectenerg-6011	245	4	n.	n.	PROPN
fuelectenerg-6011	245	5	konofaos	konofaos	PROPN
fuelectenerg-6011	245	6	,	,	PUNCT
fuelectenerg-6011	245	7	“	"	PUNCT
fuelectenerg-6011	245	8	electrical	electrical	ADJ
fuelectenerg-6011	245	9	characterisation	characterisation	NOUN
fuelectenerg-6011	245	10	of	of	ADP
fuelectenerg-6011	245	11	sion	sion	NOUN
fuelectenerg-6011	245	12	/	/	SYM
fuelectenerg-6011	245	13	n	n	CCONJ
fuelectenerg-6011	245	14	-	-	PUNCT
fuelectenerg-6011	245	15	si	si	NOUN
fuelectenerg-6011	245	16	structures	structure	NOUN
fuelectenerg-6011	245	17	for	for	ADP
fuelectenerg-6011	245	18	mos	mos	PROPN
fuelectenerg-6011	245	19	vlsi	vlsi	PROPN
fuelectenerg-6011	245	20	electronics	electronics	PROPN
fuelectenerg-6011	245	21	”	"	PUNCT
fuelectenerg-6011	245	22	,	,	PUNCT
fuelectenerg-6011	245	23	microelectron	microelectron	PROPN
fuelectenerg-6011	245	24	.	.	PUNCT
fuelectenerg-6011	246	1	j.	j.	PROPN
fuelectenerg-6011	246	2	,	,	PUNCT
fuelectenerg-6011	246	3	vol	vol	NOUN
fuelectenerg-6011	246	4	.	.	PROPN
fuelectenerg-6011	246	5	35	35	NUM
fuelectenerg-6011	246	6	,	,	PUNCT
fuelectenerg-6011	246	7	pp	pp	ADJ
fuelectenerg-6011	246	8	.	.	PUNCT
fuelectenerg-6011	247	1	421–425	421–425	NUM
fuelectenerg-6011	247	2	,	,	PUNCT
fuelectenerg-6011	247	3	2004	2004	NUM
fuelectenerg-6011	247	4	.	.	PUNCT
fuelectenerg-6011	248	1	166	166	NUM
fuelectenerg-6011	248	2	r.	r.	PROPN
fuelectenerg-6011	248	3	rajput	rajput	PROPN
fuelectenerg-6011	248	4	,	,	PUNCT
fuelectenerg-6011	248	5	r.	r.	PROPN
fuelectenerg-6011	248	6	vaid	vaid	PROPN
fuelectenerg-6011	249	1	[	[	X
fuelectenerg-6011	249	2	9	9	NUM
fuelectenerg-6011	249	3	]	]	PUNCT
fuelectenerg-6011	249	4	i.	i.	PROPN
fuelectenerg-6011	249	5	fainer	fainer	PROPN
fuelectenerg-6011	249	6	,	,	PUNCT
fuelectenerg-6011	249	7	m.	m.	PROPN
fuelectenerg-6011	249	8	l.	l.	PROPN
fuelectenerg-6011	249	9	kosinova	kosinova	PROPN
fuelectenerg-6011	249	10	,	,	PUNCT
fuelectenerg-6011	249	11	a.	a.	PROPN
fuelectenerg-6011	249	12	e.	e.	PROPN
fuelectenerg-6011	249	13	a.	a.	PROPN
fuelectenerg-6011	249	14	macimovsky	macimovsky	PROPN
fuelectenerg-6011	249	15	,	,	PUNCT
fuelectenerg-6011	249	16	yu	yu	PROPN
fuelectenerg-6011	249	17	.	.	PROPN
fuelectenerg-6011	249	18	m.	m.	NOUN
fuelectenerg-6011	249	19	rumyantsev	rumyantsev	PROPN
fuelectenerg-6011	249	20	,	,	PUNCT
fuelectenerg-6011	249	21	f.	f.	PROPN
fuelectenerg-6011	249	22	a.	a.	PROPN
fuelectenerg-6011	249	23	kuznetsov	kuznetsov	PROPN
fuelectenerg-6011	249	24	,	,	PUNCT
fuelectenerg-6011	249	25	v.	v.	PROPN
fuelectenerg-6011	249	26	g.	g.	PROPN
fuelectenerg-6011	249	27	kesler	kesler	PROPN
fuelectenerg-6011	249	28	,	,	PUNCT
fuelectenerg-6011	249	29	v.	v.	PROPN
fuelectenerg-6011	249	30	v.	v.	ADP
fuelectenerg-6011	249	31	kirienko	kirienko	PROPN
fuelectenerg-6011	249	32	,	,	PUNCT
fuelectenerg-6011	249	33	“	"	PUNCT
fuelectenerg-6011	249	34	study	study	NOUN
fuelectenerg-6011	249	35	of	of	ADP
fuelectenerg-6011	249	36	the	the	DET
fuelectenerg-6011	249	37	structure	structure	NOUN
fuelectenerg-6011	249	38	and	and	CCONJ
fuelectenerg-6011	249	39	phase	phase	NOUN
fuelectenerg-6011	249	40	composition	composition	NOUN
fuelectenerg-6011	249	41	of	of	ADP
fuelectenerg-6011	249	42	nanocrystalline	nanocrystalline	ADJ
fuelectenerg-6011	249	43	silicon	silicon	PROPN
fuelectenerg-6011	249	44	oxynitride	oxynitride	ADJ
fuelectenerg-6011	249	45	films	film	NOUN
fuelectenerg-6011	249	46	synthesized	synthesize	VERB
fuelectenerg-6011	249	47	by	by	ADP
fuelectenerg-6011	249	48	icp	icp	PROPN
fuelectenerg-6011	249	49	-	-	PUNCT
fuelectenerg-6011	249	50	cvd	cvd	PROPN
fuelectenerg-6011	249	51	”	"	PUNCT
fuelectenerg-6011	249	52	,	,	PUNCT
fuelectenerg-6011	249	53	nucl	nucl	PROPN
fuelectenerg-6011	249	54	.	.	PUNCT
fuelectenerg-6011	250	1	instrum	instrum	PROPN
fuelectenerg-6011	250	2	.	.	PUNCT
fuelectenerg-6011	251	1	and	and	CCONJ
fuelectenerg-6011	251	2	meth	meth	NOUN
fuelectenerg-6011	251	3	.	.	PUNCT
fuelectenerg-6011	252	1	in	in	ADP
fuelectenerg-6011	252	2	phys	phy	NOUN
fuelectenerg-6011	252	3	.	.	PUNCT
fuelectenerg-6011	253	1	res	re	NOUN
fuelectenerg-6011	253	2	.	.	PUNCT
fuelectenerg-6011	254	1	sect	sect	NOUN
fuelectenerg-6011	254	2	.	.	PUNCT
fuelectenerg-6011	255	1	a	a	DET
fuelectenerg-6011	255	2	,	,	PUNCT
fuelectenerg-6011	255	3	vol	vol	NOUN
fuelectenerg-6011	255	4	.	.	PROPN
fuelectenerg-6011	256	1	543	543	NUM
fuelectenerg-6011	256	2	,	,	PUNCT
fuelectenerg-6011	256	3	pp	pp	ADJ
fuelectenerg-6011	256	4	.	.	PUNCT
fuelectenerg-6011	257	1	134–138	134–138	NUM
fuelectenerg-6011	257	2	,	,	PUNCT
fuelectenerg-6011	257	3	2005	2005	NUM
fuelectenerg-6011	257	4	.	.	PUNCT
fuelectenerg-6011	258	1	[	[	X
fuelectenerg-6011	258	2	10	10	NUM
fuelectenerg-6011	258	3	]	]	PUNCT
fuelectenerg-6011	258	4	s.	s.	PROPN
fuelectenerg-6011	258	5	n.	n.	PROPN
fuelectenerg-6011	258	6	keeney	keeney	PROPN
fuelectenerg-6011	258	7	,	,	PUNCT
fuelectenerg-6011	258	8	“	"	PUNCT
fuelectenerg-6011	258	9	dielectric	dielectric	ADJ
fuelectenerg-6011	258	10	scaling	scale	VERB
fuelectenerg-6011	258	11	challenges	challenge	NOUN
fuelectenerg-6011	258	12	and	and	CCONJ
fuelectenerg-6011	258	13	approaches	approach	NOUN
fuelectenerg-6011	258	14	in	in	ADP
fuelectenerg-6011	258	15	floating	float	VERB
fuelectenerg-6011	258	16	gate	gate	NOUN
fuelectenerg-6011	258	17	non	non	ADJ
fuelectenerg-6011	258	18	-	-	ADJ
fuelectenerg-6011	258	19	volatile	volatile	ADJ
fuelectenerg-6011	258	20	memories	memory	NOUN
fuelectenerg-6011	258	21	”	"	PUNCT
fuelectenerg-6011	258	22	,	,	PUNCT
fuelectenerg-6011	258	23	in	in	ADP
fuelectenerg-6011	258	24	proceedings	proceeding	NOUN
fuelectenerg-6011	258	25	of	of	ADP
fuelectenerg-6011	258	26	the	the	DET
fuelectenerg-6011	258	27	electrochemical	electrochemical	ADJ
fuelectenerg-6011	258	28	society	society	NOUN
fuelectenerg-6011	258	29	,	,	PUNCT
fuelectenerg-6011	258	30	2004	2004	NUM
fuelectenerg-6011	258	31	,	,	PUNCT
fuelectenerg-6011	258	32	vol	vol	NOUN
fuelectenerg-6011	258	33	.	.	PROPN
fuelectenerg-6011	258	34	04	04	NUM
fuelectenerg-6011	258	35	,	,	PUNCT
fuelectenerg-6011	258	36	pp	pp	ADJ
fuelectenerg-6011	258	37	.	.	PUNCT
fuelectenerg-6011	259	1	151–158	151–158	NUM
fuelectenerg-6011	259	2	.	.	PUNCT
fuelectenerg-6011	260	1	[	[	X
fuelectenerg-6011	260	2	11	11	NUM
fuelectenerg-6011	260	3	]	]	X
fuelectenerg-6011	260	4	s.	s.	PROPN
fuelectenerg-6011	260	5	raghunathan	raghunathan	PROPN
fuelectenerg-6011	260	6	,	,	PUNCT
fuelectenerg-6011	260	7	t.	t.	NOUN
fuelectenerg-6011	260	8	krishnamohan	krishnamohan	PROPN
fuelectenerg-6011	260	9	,	,	PUNCT
fuelectenerg-6011	260	10	k.	k.	PROPN
fuelectenerg-6011	260	11	parat	parat	PROPN
fuelectenerg-6011	260	12	,	,	PUNCT
fuelectenerg-6011	260	13	and	and	CCONJ
fuelectenerg-6011	260	14	k.	k.	PROPN
fuelectenerg-6011	260	15	saraswat	saraswat	PROPN
fuelectenerg-6011	260	16	,	,	PUNCT
fuelectenerg-6011	260	17	“	"	PUNCT
fuelectenerg-6011	260	18	investigation	investigation	NOUN
fuelectenerg-6011	260	19	of	of	ADP
fuelectenerg-6011	260	20	ballistic	ballistic	ADJ
fuelectenerg-6011	260	21	current	current	NOUN
fuelectenerg-6011	260	22	in	in	ADP
fuelectenerg-6011	260	23	scaled	scaled	ADJ
fuelectenerg-6011	260	24	floating	float	VERB
fuelectenerg-6011	260	25	-	-	PUNCT
fuelectenerg-6011	260	26	gate	gate	NOUN
fuelectenerg-6011	260	27	nand	nand	NOUN
fuelectenerg-6011	260	28	flash	flash	NOUN
fuelectenerg-6011	260	29	and	and	CCONJ
fuelectenerg-6011	260	30	a	a	DET
fuelectenerg-6011	260	31	solution	solution	NOUN
fuelectenerg-6011	260	32	”	"	PUNCT
fuelectenerg-6011	260	33	,	,	PUNCT
fuelectenerg-6011	260	34	in	in	ADP
fuelectenerg-6011	260	35	proceedings	proceeding	NOUN
fuelectenerg-6011	260	36	of	of	ADP
fuelectenerg-6011	260	37	the	the	DET
fuelectenerg-6011	260	38	ieee	ieee	NOUN
fuelectenerg-6011	260	39	international	international	PROPN
fuelectenerg-6011	260	40	electron	electron	NOUN
fuelectenerg-6011	260	41	devices	device	NOUN
fuelectenerg-6011	260	42	meeting	meeting	NOUN
fuelectenerg-6011	260	43	,	,	PUNCT
fuelectenerg-6011	260	44	baltimore	baltimore	PROPN
fuelectenerg-6011	260	45	,	,	PUNCT
fuelectenerg-6011	260	46	md	md	PROPN
fuelectenerg-6011	260	47	,	,	PUNCT
fuelectenerg-6011	260	48	7	7	NUM
fuelectenerg-6011	260	49	-	-	SYM
fuelectenerg-6011	260	50	9	9	NUM
fuelectenerg-6011	260	51	december	december	NOUN
fuelectenerg-6011	260	52	,	,	PUNCT
fuelectenerg-6011	260	53	2009	2009	NUM
fuelectenerg-6011	260	54	,	,	PUNCT
fuelectenerg-6011	260	55	pp	pp	ADV
fuelectenerg-6011	260	56	.	.	PUNCT
fuelectenerg-6011	261	1	34.1.1–3.4.1.4	34.1.1–3.4.1.4	NUM
fuelectenerg-6011	262	1	[	[	X
fuelectenerg-6011	262	2	12	12	NUM
fuelectenerg-6011	262	3	]	]	PUNCT
fuelectenerg-6011	262	4	s.	s.	PROPN
fuelectenerg-6011	262	5	jayanti	jayanti	PROPN
fuelectenerg-6011	262	6	,	,	PUNCT
fuelectenerg-6011	262	7	x.	x.	PROPN
fuelectenerg-6011	262	8	yang	yang	PROPN
fuelectenerg-6011	262	9	,	,	PUNCT
fuelectenerg-6011	262	10	r.	r.	PROPN
fuelectenerg-6011	262	11	suri	suri	PROPN
fuelectenerg-6011	262	12	and	and	CCONJ
fuelectenerg-6011	262	13	v.	v.	ADP
fuelectenerg-6011	262	14	misra	misra	ADJ
fuelectenerg-6011	262	15	,	,	PUNCT
fuelectenerg-6011	262	16	“	"	PUNCT
fuelectenerg-6011	262	17	ultimate	ultimate	ADJ
fuelectenerg-6011	262	18	scalability	scalability	NOUN
fuelectenerg-6011	262	19	of	of	ADP
fuelectenerg-6011	262	20	tan	tan	ADJ
fuelectenerg-6011	262	21	metal	metal	NOUN
fuelectenerg-6011	262	22	floating	float	VERB
fuelectenerg-6011	262	23	gate	gate	NOUN
fuelectenerg-6011	262	24	with	with	ADP
fuelectenerg-6011	262	25	incorporation	incorporation	NOUN
fuelectenerg-6011	262	26	of	of	ADP
fuelectenerg-6011	262	27	high	high	ADJ
fuelectenerg-6011	262	28	-	-	PUNCT
fuelectenerg-6011	262	29	k	k	NOUN
fuelectenerg-6011	262	30	blocking	block	VERB
fuelectenerg-6011	262	31	dielectrics	dielectric	NOUN
fuelectenerg-6011	262	32	for	for	ADP
fuelectenerg-6011	262	33	flash	flash	NOUN
fuelectenerg-6011	262	34	memory	memory	NOUN
fuelectenerg-6011	262	35	applications	application	NOUN
fuelectenerg-6011	262	36	”	"	PUNCT
fuelectenerg-6011	262	37	,	,	PUNCT
fuelectenerg-6011	262	38	in	in	ADP
fuelectenerg-6011	262	39	proceedings	proceeding	NOUN
fuelectenerg-6011	262	40	of	of	ADP
fuelectenerg-6011	262	41	the	the	DET
fuelectenerg-6011	262	42	international	international	ADJ
fuelectenerg-6011	262	43	electron	electron	NOUN
fuelectenerg-6011	262	44	devices	device	NOUN
fuelectenerg-6011	262	45	meeting	meeting	NOUN
fuelectenerg-6011	262	46	,	,	PUNCT
fuelectenerg-6011	262	47	2010	2010	NUM
fuelectenerg-6011	262	48	,	,	PUNCT
fuelectenerg-6011	262	49	pp	pp	ADV
fuelectenerg-6011	262	50	.	.	PUNCT
fuelectenerg-6011	263	1	5.3.1–5.3.4	5.3.1–5.3.4	NUM
fuelectenerg-6011	263	2	[	[	X
fuelectenerg-6011	263	3	13	13	NUM
fuelectenerg-6011	263	4	]	]	PUNCT
fuelectenerg-6011	263	5	j.	j.	PROPN
fuelectenerg-6011	263	6	brewer	brewer	PROPN
fuelectenerg-6011	263	7	and	and	CCONJ
fuelectenerg-6011	263	8	m.	m.	NOUN
fuelectenerg-6011	263	9	gill	gill	PROPN
fuelectenerg-6011	263	10	,	,	PUNCT
fuelectenerg-6011	263	11	nonvolatile	nonvolatile	ADJ
fuelectenerg-6011	263	12	memory	memory	NOUN
fuelectenerg-6011	263	13	technologies	technology	NOUN
fuelectenerg-6011	263	14	with	with	ADP
fuelectenerg-6011	263	15	emphasis	emphasis	NOUN
fuelectenerg-6011	263	16	on	on	ADP
fuelectenerg-6011	263	17	flash	flash	NOUN
fuelectenerg-6011	263	18	:	:	PUNCT
fuelectenerg-6011	263	19	a	a	DET
fuelectenerg-6011	263	20	comprehensive	comprehensive	ADJ
fuelectenerg-6011	263	21	guide	guide	NOUN
fuelectenerg-6011	263	22	to	to	ADP
fuelectenerg-6011	263	23	understanding	understanding	NOUN
fuelectenerg-6011	263	24	and	and	CCONJ
fuelectenerg-6011	263	25	using	use	VERB
fuelectenerg-6011	263	26	nvsm	nvsm	NOUN
fuelectenerg-6011	263	27	devices	device	NOUN
fuelectenerg-6011	263	28	,	,	PUNCT
fuelectenerg-6011	263	29	ieee	ieee	NOUN
fuelectenerg-6011	263	30	,	,	PUNCT
fuelectenerg-6011	263	31	in	in	ADP
fuelectenerg-6011	263	32	press	press	NOUN
fuelectenerg-6011	263	33	:	:	PUNCT
fuelectenerg-6011	263	34	piscataway	piscataway	PROPN
fuelectenerg-6011	263	35	,	,	PUNCT
fuelectenerg-6011	263	36	nj	nj	PROPN
fuelectenerg-6011	263	37	,	,	PUNCT
fuelectenerg-6011	263	38	usa	usa	PROPN
fuelectenerg-6011	263	39	,	,	PUNCT
fuelectenerg-6011	263	40	2008	2008	NUM
fuelectenerg-6011	263	41	.	.	PUNCT
fuelectenerg-6011	264	1	[	[	X
fuelectenerg-6011	264	2	14	14	NUM
fuelectenerg-6011	264	3	]	]	X
fuelectenerg-6011	264	4	b.	b.	PROPN
fuelectenerg-6011	264	5	park	park	PROPN
fuelectenerg-6011	264	6	,	,	PUNCT
fuelectenerg-6011	264	7	k.	k.	PROPN
fuelectenerg-6011	264	8	cho	cho	PROPN
fuelectenerg-6011	264	9	,	,	PUNCT
fuelectenerg-6011	264	10	j.	j.	PROPN
fuelectenerg-6011	264	11	yun	yun	PROPN
fuelectenerg-6011	264	12	,	,	PUNCT
fuelectenerg-6011	264	13	y.	y.	PROPN
fuelectenerg-6011	264	14	s.	s.	PROPN
fuelectenerg-6011	264	15	koo	koo	PROPN
fuelectenerg-6011	264	16	,	,	PUNCT
fuelectenerg-6011	264	17	j.	j.	PROPN
fuelectenerg-6011	264	18	h.	h.	PROPN
fuelectenerg-6011	264	19	lee	lee	PROPN
fuelectenerg-6011	264	20	,	,	PUNCT
fuelectenerg-6011	264	21	and	and	CCONJ
fuelectenerg-6011	264	22	s.	s.	PROPN
fuelectenerg-6011	264	23	kim	kim	PROPN
fuelectenerg-6011	264	24	,	,	PUNCT
fuelectenerg-6011	264	25	“	"	PUNCT
fuelectenerg-6011	264	26	electrical	electrical	ADJ
fuelectenerg-6011	264	27	characteristics	characteristic	NOUN
fuelectenerg-6011	264	28	of	of	ADP
fuelectenerg-6011	264	29	floating	float	VERB
fuelectenerg-6011	264	30	-	-	PUNCT
fuelectenerg-6011	264	31	gate	gate	NOUN
fuelectenerg-6011	264	32	memory	memory	NOUN
fuelectenerg-6011	264	33	devices	device	NOUN
fuelectenerg-6011	264	34	with	with	ADP
fuelectenerg-6011	264	35	titanium	titanium	NOUN
fuelectenerg-6011	264	36	nanoparticles	nanoparticle	NOUN
fuelectenerg-6011	264	37	embedded	embed	VERB
fuelectenerg-6011	264	38	in	in	ADP
fuelectenerg-6011	264	39	gate	gate	NOUN
fuelectenerg-6011	264	40	oxides	oxide	NOUN
fuelectenerg-6011	264	41	”	"	PUNCT
fuelectenerg-6011	264	42	,	,	PUNCT
fuelectenerg-6011	264	43	j.	j.	PROPN
fuelectenerg-6011	264	44	of	of	ADP
fuelectenerg-6011	264	45	nanosci	nanosci	PROPN
fuelectenerg-6011	264	46	.	.	PUNCT
fuelectenerg-6011	265	1	and	and	CCONJ
fuelectenerg-6011	265	2	nanotech	nanotech	PROPN
fuelectenerg-6011	265	3	.	.	PROPN
fuelectenerg-6011	265	4	,	,	PUNCT
fuelectenerg-6011	265	5	vol	vol	NOUN
fuelectenerg-6011	265	6	.	.	PROPN
fuelectenerg-6011	265	7	8	8	NUM
fuelectenerg-6011	265	8	,	,	PUNCT
fuelectenerg-6011	265	9	pp	pp	ADJ
fuelectenerg-6011	265	10	.	.	PUNCT
fuelectenerg-6011	266	1	1904–1908	1904–1908	NUM
fuelectenerg-6011	266	2	,	,	PUNCT
fuelectenerg-6011	266	3	2008	2008	NUM
fuelectenerg-6011	266	4	.	.	PUNCT
fuelectenerg-6011	267	1	[	[	X
fuelectenerg-6011	267	2	15	15	NUM
fuelectenerg-6011	267	3	]	]	X
fuelectenerg-6011	267	4	c.	c.	PROPN
fuelectenerg-6011	267	5	lee	lee	PROPN
fuelectenerg-6011	267	6	,	,	PUNCT
fuelectenerg-6011	267	7	j.	j.	PROPN
fuelectenerg-6011	267	8	meteer	meteer	PROPN
fuelectenerg-6011	267	9	,	,	PUNCT
fuelectenerg-6011	267	10	v.	v.	PROPN
fuelectenerg-6011	267	11	narayanan	narayanan	PROPN
fuelectenerg-6011	267	12	and	and	CCONJ
fuelectenerg-6011	267	13	e.	e.	PROPN
fuelectenerg-6011	267	14	c.	c.	PROPN
fuelectenerg-6011	267	15	kan	kan	PROPN
fuelectenerg-6011	267	16	,	,	PUNCT
fuelectenerg-6011	267	17	“	"	PUNCT
fuelectenerg-6011	267	18	self	self	NOUN
fuelectenerg-6011	267	19	-	-	PUNCT
fuelectenerg-6011	267	20	assembly	assembly	NOUN
fuelectenerg-6011	267	21	of	of	ADP
fuelectenerg-6011	267	22	metal	metal	NOUN
fuelectenerg-6011	267	23	nanocrystals	nanocrystal	NOUN
fuelectenerg-6011	267	24	on	on	ADP
fuelectenerg-6011	267	25	ultrathin	ultrathin	ADJ
fuelectenerg-6011	267	26	oxide	oxide	NOUN
fuelectenerg-6011	267	27	for	for	ADP
fuelectenerg-6011	267	28	nonvolatile	nonvolatile	NOUN
fuelectenerg-6011	267	29	memory	memory	NOUN
fuelectenerg-6011	267	30	applications	application	NOUN
fuelectenerg-6011	267	31	”	"	PUNCT
fuelectenerg-6011	267	32	,	,	PUNCT
fuelectenerg-6011	267	33	j.	j.	PROPN
fuelectenerg-6011	267	34	of	of	ADP
fuelectenerg-6011	267	35	electron	electron	PROPN
fuelectenerg-6011	267	36	.	.	PUNCT
fuelectenerg-6011	268	1	mater	mater	PROPN
fuelectenerg-6011	268	2	.	.	PUNCT
fuelectenerg-6011	268	3	,	,	PUNCT
fuelectenerg-6011	268	4	vol	vol	NOUN
fuelectenerg-6011	268	5	.	.	PUNCT
fuelectenerg-6011	269	1	34	34	NUM
fuelectenerg-6011	269	2	pp	pp	NOUN
fuelectenerg-6011	269	3	.	.	PUNCT
fuelectenerg-6011	270	1	1–11	1–11	PROPN
fuelectenerg-6011	270	2	,	,	PUNCT
fuelectenerg-6011	270	3	2005	2005	NUM
fuelectenerg-6011	270	4	.	.	PUNCT
fuelectenerg-6011	271	1	[	[	X
fuelectenerg-6011	271	2	16	16	NUM
fuelectenerg-6011	271	3	]	]	PUNCT
fuelectenerg-6011	271	4	z.	z.	PROPN
fuelectenerg-6011	271	5	liu	liu	PROPN
fuelectenerg-6011	271	6	,	,	PUNCT
fuelectenerg-6011	271	7	c.	c.	PROPN
fuelectenerg-6011	271	8	lee	lee	PROPN
fuelectenerg-6011	271	9	,	,	PUNCT
fuelectenerg-6011	271	10	v.	v.	PROPN
fuelectenerg-6011	271	11	narayanan	narayanan	PROPN
fuelectenerg-6011	271	12	,	,	PUNCT
fuelectenerg-6011	271	13	g.	g.	PROPN
fuelectenerg-6011	271	14	pei	pei	PROPN
fuelectenerg-6011	271	15	and	and	CCONJ
fuelectenerg-6011	271	16	e.c	e.c	PROPN
fuelectenerg-6011	271	17	.	.	PROPN
fuelectenerg-6011	271	18	kan	kan	PROPN
fuelectenerg-6011	271	19	,	,	PUNCT
fuelectenerg-6011	271	20	“	"	PUNCT
fuelectenerg-6011	271	21	metal	metal	NOUN
fuelectenerg-6011	271	22	nanocrystal	nanocrystal	ADJ
fuelectenerg-6011	271	23	memories	memory	NOUN
fuelectenerg-6011	271	24	-	-	PUNCT
fuelectenerg-6011	271	25	part	part	NOUN
fuelectenerg-6011	271	26	i	i	NOUN
fuelectenerg-6011	271	27	:	:	PUNCT
fuelectenerg-6011	271	28	device	device	NOUN
fuelectenerg-6011	271	29	design	design	NOUN
fuelectenerg-6011	271	30	and	and	CCONJ
fuelectenerg-6011	271	31	fabrication	fabrication	NOUN
fuelectenerg-6011	271	32	”	"	PUNCT
fuelectenerg-6011	271	33	,	,	PUNCT
fuelectenerg-6011	271	34	ieee	ieee	NOUN
fuelectenerg-6011	271	35	trans	trans	PROPN
fuelectenerg-6011	271	36	.	.	PUNCT
fuelectenerg-6011	272	1	on	on	ADP
fuelectenerg-6011	272	2	electron	electron	NOUN
fuelectenerg-6011	272	3	devices	device	NOUN
fuelectenerg-6011	272	4	,	,	PUNCT
fuelectenerg-6011	272	5	vol	vol	NOUN
fuelectenerg-6011	272	6	.	.	PROPN
fuelectenerg-6011	272	7	49	49	NUM
fuelectenerg-6011	272	8	,	,	PUNCT
fuelectenerg-6011	272	9	pp	pp	ADJ
fuelectenerg-6011	272	10	.	.	PUNCT
fuelectenerg-6011	273	1	1606–1613	1606–1613	NUM
fuelectenerg-6011	273	2	,	,	PUNCT
fuelectenerg-6011	273	3	2002	2002	NUM
fuelectenerg-6011	273	4	.	.	PUNCT
fuelectenerg-6011	274	1	[	[	X
fuelectenerg-6011	274	2	17	17	NUM
fuelectenerg-6011	274	3	]	]	X
fuelectenerg-6011	274	4	c.	c.	PROPN
fuelectenerg-6011	274	5	lee	lee	PROPN
fuelectenerg-6011	274	6	,	,	PUNCT
fuelectenerg-6011	274	7	t.	t.	PROPN
fuelectenerg-6011	274	8	h.	h.	PROPN
fuelectenerg-6011	274	9	hou	hou	PROPN
fuelectenerg-6011	274	10	,	,	PUNCT
fuelectenerg-6011	274	11	and	and	CCONJ
fuelectenerg-6011	274	12	e.	e.	PROPN
fuelectenerg-6011	274	13	c.	c.	PROPN
fuelectenerg-6011	274	14	c.	c.	PROPN
fuelectenerg-6011	274	15	kan	kan	PROPN
fuelectenerg-6011	274	16	,	,	PUNCT
fuelectenerg-6011	274	17	“	"	PUNCT
fuelectenerg-6011	274	18	nonvolatile	nonvolatile	ADJ
fuelectenerg-6011	274	19	memory	memory	NOUN
fuelectenerg-6011	274	20	with	with	ADP
fuelectenerg-6011	274	21	a	a	DET
fuelectenerg-6011	274	22	metal	metal	NOUN
fuelectenerg-6011	274	23	nanocrystal	nanocrystal	ADJ
fuelectenerg-6011	274	24	/	/	SYM
fuelectenerg-6011	274	25	nitride	nitride	ADJ
fuelectenerg-6011	274	26	heterogeneous	heterogeneous	ADJ
fuelectenerg-6011	274	27	floating	float	VERB
fuelectenerg-6011	274	28	-	-	PUNCT
fuelectenerg-6011	274	29	gate	gate	NOUN
fuelectenerg-6011	274	30	”	"	PUNCT
fuelectenerg-6011	274	31	,	,	PUNCT
fuelectenerg-6011	274	32	ieee	ieee	NOUN
fuelectenerg-6011	274	33	trans	trans	PROPN
fuelectenerg-6011	274	34	.	.	PUNCT
fuelectenerg-6011	275	1	on	on	ADP
fuelectenerg-6011	275	2	electron	electron	NOUN
fuelectenerg-6011	275	3	devices	device	NOUN
fuelectenerg-6011	275	4	,	,	PUNCT
fuelectenerg-6011	275	5	vol	vol	NOUN
fuelectenerg-6011	275	6	.	.	PROPN
fuelectenerg-6011	275	7	52	52	NUM
fuelectenerg-6011	275	8	,	,	PUNCT
fuelectenerg-6011	275	9	pp	pp	ADJ
fuelectenerg-6011	275	10	.	.	PUNCT
fuelectenerg-6011	275	11	2697–2702	2697–2702	NUM
fuelectenerg-6011	275	12	,	,	PUNCT
fuelectenerg-6011	275	13	2005	2005	NUM
fuelectenerg-6011	275	14	.	.	PUNCT
fuelectenerg-6011	276	1	[	[	X
fuelectenerg-6011	276	2	18	18	NUM
fuelectenerg-6011	276	3	]	]	X
fuelectenerg-6011	276	4	s.	s.	PROPN
fuelectenerg-6011	276	5	yamazaki	yamazaki	PROPN
fuelectenerg-6011	276	6	,	,	PUNCT
fuelectenerg-6011	276	7	k.	k.	PROPN
fuelectenerg-6011	276	8	hatakeyama	hatakeyama	PROPN
fuelectenerg-6011	276	9	,	,	PUNCT
fuelectenerg-6011	276	10	i.	i.	PROPN
fuelectenerg-6011	276	11	kagawa	kagawa	PROPN
fuelectenerg-6011	276	12	,	,	PUNCT
fuelectenerg-6011	276	13	and	and	CCONJ
fuelectenerg-6011	276	14	y.	y.	PROPN
fuelectenerg-6011	276	15	yamashita	yamashita	PROPN
fuelectenerg-6011	276	16	,	,	PUNCT
fuelectenerg-6011	276	17	“	"	PUNCT
fuelectenerg-6011	276	18	properties	property	NOUN
fuelectenerg-6011	276	19	of	of	ADP
fuelectenerg-6011	276	20	nonvolatile	nonvolatile	ADJ
fuelectenerg-6011	276	21	semiconductor	semiconductor	NOUN
fuelectenerg-6011	276	22	memories	memory	NOUN
fuelectenerg-6011	276	23	by	by	ADP
fuelectenerg-6011	276	24	using	use	VERB
fuelectenerg-6011	276	25	silicon	silicon	NOUN
fuelectenerg-6011	276	26	clusters	cluster	NOUN
fuelectenerg-6011	276	27	in	in	ADP
fuelectenerg-6011	276	28	the	the	DET
fuelectenerg-6011	276	29	gate	gate	NOUN
fuelectenerg-6011	276	30	insulator	insulator	NOUN
fuelectenerg-6011	276	31	”	"	PUNCT
fuelectenerg-6011	276	32	,	,	PUNCT
fuelectenerg-6011	276	33	in	in	ADP
fuelectenerg-6011	276	34	proceedings	proceeding	NOUN
fuelectenerg-6011	276	35	of	of	ADP
fuelectenerg-6011	276	36	the	the	DET
fuelectenerg-6011	276	37	international	international	ADJ
fuelectenerg-6011	276	38	electron	electron	NOUN
fuelectenerg-6011	276	39	devices	device	NOUN
fuelectenerg-6011	276	40	meeting	meet	VERB
fuelectenerg-6011	276	41	technical	technical	ADJ
fuelectenerg-6011	276	42	digest	digest	NOUN
fuelectenerg-6011	276	43	,	,	PUNCT
fuelectenerg-6011	276	44	1973	1973	NUM
fuelectenerg-6011	276	45	,	,	PUNCT
fuelectenerg-6011	276	46	pp	pp	ADV
fuelectenerg-6011	276	47	.	.	PUNCT
fuelectenerg-6011	277	1	355–358	355–358	NUM
fuelectenerg-6011	277	2	.	.	PUNCT
fuelectenerg-6011	278	1	[	[	X
fuelectenerg-6011	278	2	19	19	NUM
fuelectenerg-6011	278	3	]	]	PUNCT
fuelectenerg-6011	278	4	s.	s.	PROPN
fuelectenerg-6011	278	5	yamazaki	yamazaki	PROPN
fuelectenerg-6011	278	6	,	,	PUNCT
fuelectenerg-6011	278	7	“	"	PUNCT
fuelectenerg-6011	278	8	metal	metal	NOUN
fuelectenerg-6011	278	9	-	-	PUNCT
fuelectenerg-6011	278	10	insulator	insulator	NOUN
fuelectenerg-6011	278	11	-	-	PUNCT
fuelectenerg-6011	278	12	semiconductor	semiconductor	NOUN
fuelectenerg-6011	278	13	structures	structure	NOUN
fuelectenerg-6011	278	14	,	,	PUNCT
fuelectenerg-6011	278	15	”	"	PUNCT
fuelectenerg-6011	278	16	ceramic	ceramic	ADJ
fuelectenerg-6011	278	17	bulletin	bulletin	NOUN
fuelectenerg-6011	278	18	,	,	PUNCT
fuelectenerg-6011	278	19	vol	vol	NOUN
fuelectenerg-6011	278	20	.	.	PROPN
fuelectenerg-6011	278	21	64	64	NUM
fuelectenerg-6011	278	22	,	,	PUNCT
fuelectenerg-6011	278	23	pp	pp	ADJ
fuelectenerg-6011	278	24	.	.	PUNCT
fuelectenerg-6011	279	1	1585–1589	1585–1589	NUM
fuelectenerg-6011	279	2	,	,	PUNCT
fuelectenerg-6011	279	3	1985	1985	NUM
fuelectenerg-6011	279	4	.	.	PUNCT
fuelectenerg-6011	280	1	[	[	X
fuelectenerg-6011	280	2	20	20	NUM
fuelectenerg-6011	280	3	]	]	PUNCT
fuelectenerg-6011	280	4	r.	r.	PROPN
fuelectenerg-6011	280	5	f.	f.	PROPN
fuelectenerg-6011	280	6	steimle	steimle	PROPN
fuelectenerg-6011	280	7	,	,	PUNCT
fuelectenerg-6011	280	8	m.	m.	NOUN
fuelectenerg-6011	280	9	sadd	sadd	PROPN
fuelectenerg-6011	280	10	,	,	PUNCT
fuelectenerg-6011	280	11	r.	r.	PROPN
fuelectenerg-6011	280	12	muralidhar	muralidhar	PROPN
fuelectenerg-6011	280	13	,	,	PUNCT
fuelectenerg-6011	280	14	r.	r.	PROPN
fuelectenerg-6011	280	15	rao	rao	PROPN
fuelectenerg-6011	280	16	,	,	PUNCT
fuelectenerg-6011	280	17	b.	b.	PROPN
fuelectenerg-6011	280	18	hradsky	hradsky	PROPN
fuelectenerg-6011	280	19	,	,	PUNCT
fuelectenerg-6011	280	20	s.	s.	PROPN
fuelectenerg-6011	280	21	straub	straub	PROPN
fuelectenerg-6011	280	22	and	and	CCONJ
fuelectenerg-6011	280	23	b.	b.	PROPN
fuelectenerg-6011	280	24	e.	e.	PROPN
fuelectenerg-6011	280	25	white	white	PROPN
fuelectenerg-6011	280	26	jr	jr	PROPN
fuelectenerg-6011	280	27	.	.	PROPN
fuelectenerg-6011	280	28	,	,	PUNCT
fuelectenerg-6011	280	29	“	"	PUNCT
fuelectenerg-6011	280	30	hybrid	hybrid	ADJ
fuelectenerg-6011	280	31	silicon	silicon	NOUN
fuelectenerg-6011	280	32	nanocrystal	nanocrystal	PROPN
fuelectenerg-6011	280	33	silicon	silicon	NOUN
fuelectenerg-6011	280	34	nitride	nitride	ADJ
fuelectenerg-6011	280	35	dynamic	dynamic	ADJ
fuelectenerg-6011	280	36	random	random	ADJ
fuelectenerg-6011	280	37	access	access	NOUN
fuelectenerg-6011	280	38	memory	memory	NOUN
fuelectenerg-6011	280	39	”	"	PUNCT
fuelectenerg-6011	280	40	,	,	PUNCT
fuelectenerg-6011	280	41	ieee	ieee	PROPN
fuelectenerg-6011	280	42	trans	tran	NOUN
fuelectenerg-6011	280	43	.	.	PUNCT
fuelectenerg-6011	280	44	nanotechn	nanotechn	PROPN
fuelectenerg-6011	280	45	.	.	PUNCT
fuelectenerg-6011	281	1	,	,	PUNCT
fuelectenerg-6011	281	2	vol	vol	NOUN
fuelectenerg-6011	281	3	.	.	PROPN
fuelectenerg-6011	281	4	2	2	NUM
fuelectenerg-6011	281	5	,	,	PUNCT
fuelectenerg-6011	281	6	pp	pp	ADJ
fuelectenerg-6011	281	7	.	.	PUNCT
fuelectenerg-6011	282	1	335–340	335–340	NUM
fuelectenerg-6011	282	2	,	,	PUNCT
fuelectenerg-6011	282	3	2003	2003	NUM
fuelectenerg-6011	282	4	.	.	PUNCT
fuelectenerg-6011	283	1	[	[	X
fuelectenerg-6011	283	2	21	21	NUM
fuelectenerg-6011	283	3	]	]	X
fuelectenerg-6011	283	4	r.	r.	PROPN
fuelectenerg-6011	283	5	f.	f.	PROPN
fuelectenerg-6011	283	6	steimle	steimle	PROPN
fuelectenerg-6011	283	7	,	,	PUNCT
fuelectenerg-6011	283	8	r.	r.	PROPN
fuelectenerg-6011	283	9	a.	a.	PROPN
fuelectenerg-6011	283	10	rao	rao	PROPN
fuelectenerg-6011	283	11	,	,	PUNCT
fuelectenerg-6011	283	12	b.	b.	PROPN
fuelectenerg-6011	283	13	hradsky	hradsky	PROPN
fuelectenerg-6011	283	14	,	,	PUNCT
fuelectenerg-6011	283	15	r.	r.	PROPN
fuelectenerg-6011	283	16	muralidhar	muralidhar	PROPN
fuelectenerg-6011	283	17	,	,	PUNCT
fuelectenerg-6011	283	18	m.	m.	NOUN
fuelectenerg-6011	283	19	sadd	sadd	PROPN
fuelectenerg-6011	283	20	,	,	PUNCT
fuelectenerg-6011	283	21	m.	m.	NOUN
fuelectenerg-6011	283	22	ramon	ramon	NOUN
fuelectenerg-6011	283	23	,	,	PUNCT
fuelectenerg-6011	283	24	s.	s.	PROPN
fuelectenerg-6011	283	25	straub	straub	PROPN
fuelectenerg-6011	283	26	,	,	PUNCT
fuelectenerg-6011	283	27	s.	s.	PROPN
fuelectenerg-6011	283	28	bagchi	bagchi	PROPN
fuelectenerg-6011	283	29	,	,	PUNCT
fuelectenerg-6011	283	30	x.	x.	PROPN
fuelectenerg-6011	283	31	d.	d.	PROPN
fuelectenerg-6011	283	32	wang	wang	PROPN
fuelectenerg-6011	283	33	,	,	PUNCT
fuelectenerg-6011	283	34	j.	j.	PROPN
fuelectenerg-6011	283	35	hooker	hooker	PROPN
fuelectenerg-6011	283	36	and	and	CCONJ
fuelectenerg-6011	283	37	b.	b.	PROPN
fuelectenerg-6011	283	38	e.	e.	PROPN
fuelectenerg-6011	283	39	white	white	PROPN
fuelectenerg-6011	283	40	jr	jr	PROPN
fuelectenerg-6011	283	41	.	.	PROPN
fuelectenerg-6011	283	42	,	,	PUNCT
fuelectenerg-6011	283	43	“	"	PUNCT
fuelectenerg-6011	283	44	hybrid	hybrid	ADJ
fuelectenerg-6011	283	45	silicon	silicon	NOUN
fuelectenerg-6011	283	46	nanocrystal	nanocrystal	PROPN
fuelectenerg-6011	283	47	silicon	silicon	PROPN
fuelectenerg-6011	283	48	nitride	nitride	PROPN
fuelectenerg-6011	283	49	memory	memory	NOUN
fuelectenerg-6011	283	50	”	"	PUNCT
fuelectenerg-6011	283	51	,	,	PUNCT
fuelectenerg-6011	283	52	in	in	ADP
fuelectenerg-6011	283	53	proceedings	proceeding	NOUN
fuelectenerg-6011	283	54	of	of	ADP
fuelectenerg-6011	283	55	the	the	DET
fuelectenerg-6011	283	56	icssdm	icssdm	NOUN
fuelectenerg-6011	283	57	,	,	PUNCT
fuelectenerg-6011	283	58	2003	2003	NUM
fuelectenerg-6011	283	59	,	,	PUNCT
fuelectenerg-6011	283	60	pp	pp	ADP
fuelectenerg-6011	283	61	.	.	PUNCT
fuelectenerg-6011	284	1	848–849	848–849	NUM
fuelectenerg-6011	284	2	.	.	PUNCT
fuelectenerg-6011	285	1	[	[	X
fuelectenerg-6011	285	2	22	22	NUM
fuelectenerg-6011	285	3	]	]	X
fuelectenerg-6011	285	4	c.	c.	PROPN
fuelectenerg-6011	285	5	sargentis	sargentis	PROPN
fuelectenerg-6011	285	6	,	,	PUNCT
fuelectenerg-6011	285	7	k.	k.	PROPN
fuelectenerg-6011	285	8	giannakopoulos	giannakopoulos	PROPN
fuelectenerg-6011	285	9	,	,	PUNCT
fuelectenerg-6011	285	10	a.	a.	NOUN
fuelectenerg-6011	285	11	travlos	travlos	PROPN
fuelectenerg-6011	285	12	and	and	CCONJ
fuelectenerg-6011	285	13	d.	d.	PROPN
fuelectenerg-6011	285	14	tsamakis	tsamakis	PROPN
fuelectenerg-6011	285	15	,	,	PUNCT
fuelectenerg-6011	285	16	“	"	PUNCT
fuelectenerg-6011	285	17	fabrication	fabrication	NOUN
fuelectenerg-6011	285	18	and	and	CCONJ
fuelectenerg-6011	285	19	characterization	characterization	NOUN
fuelectenerg-6011	285	20	of	of	ADP
fuelectenerg-6011	285	21	a	a	DET
fuelectenerg-6011	285	22	metal	metal	NOUN
fuelectenerg-6011	285	23	nanocrystal	nanocrystal	ADJ
fuelectenerg-6011	285	24	memory	memory	NOUN
fuelectenerg-6011	285	25	using	use	VERB
fuelectenerg-6011	285	26	molecular	molecular	ADJ
fuelectenerg-6011	285	27	beam	beam	NOUN
fuelectenerg-6011	285	28	epitaxy	epitaxy	PROPN
fuelectenerg-6011	285	29	”	"	PUNCT
fuelectenerg-6011	285	30	,	,	PUNCT
fuelectenerg-6011	285	31	j.	j.	PROPN
fuelectenerg-6011	285	32	of	of	ADP
fuelectenerg-6011	285	33	phys	phys	PROPN
fuelectenerg-6011	285	34	.	.	PUNCT
fuelectenerg-6011	285	35	,	,	PUNCT
fuelectenerg-6011	285	36	vol	vol	NOUN
fuelectenerg-6011	285	37	.	.	PROPN
fuelectenerg-6011	285	38	10	10	NUM
fuelectenerg-6011	285	39	,	,	PUNCT
fuelectenerg-6011	285	40	pp	pp	ADJ
fuelectenerg-6011	285	41	.	.	PUNCT
fuelectenerg-6011	286	1	53–56	53–56	NUM
fuelectenerg-6011	286	2	,	,	PUNCT
fuelectenerg-6011	286	3	2005	2005	NUM
fuelectenerg-6011	286	4	.	.	PUNCT
fuelectenerg-6011	287	1	[	[	X
fuelectenerg-6011	287	2	23	23	NUM
fuelectenerg-6011	287	3	]	]	PUNCT
fuelectenerg-6011	287	4	j.	j.	PROPN
fuelectenerg-6011	287	5	j.	j.	PROPN
fuelectenerg-6011	287	6	lee	lee	PROPN
fuelectenerg-6011	287	7	and	and	CCONJ
fuelectenerg-6011	287	8	d.	d.	PROPN
fuelectenerg-6011	287	9	l.	l.	PROPN
fuelectenerg-6011	287	10	kwong	kwong	PROPN
fuelectenerg-6011	287	11	,	,	PUNCT
fuelectenerg-6011	287	12	“	"	PUNCT
fuelectenerg-6011	287	13	metal	metal	NOUN
fuelectenerg-6011	287	14	nanocrystal	nanocrystal	ADJ
fuelectenerg-6011	287	15	memory	memory	NOUN
fuelectenerg-6011	287	16	with	with	ADP
fuelectenerg-6011	287	17	high	high	ADJ
fuelectenerg-6011	287	18	-	-	PUNCT
fuelectenerg-6011	287	19	k	k	NOUN
fuelectenerg-6011	287	20	tunneling	tunneling	NOUN
fuelectenerg-6011	287	21	barrier	barrier	NOUN
fuelectenerg-6011	287	22	for	for	ADP
fuelectenerg-6011	287	23	improved	improved	ADJ
fuelectenerg-6011	287	24	data	data	NOUN
fuelectenerg-6011	287	25	retention	retention	NOUN
fuelectenerg-6011	287	26	,	,	PUNCT
fuelectenerg-6011	287	27	”	"	PUNCT
fuelectenerg-6011	287	28	ieee	ieee	NOUN
fuelectenerg-6011	287	29	trans	tran	NOUN
fuelectenerg-6011	287	30	.	.	PUNCT
fuelectenerg-6011	288	1	on	on	ADP
fuelectenerg-6011	288	2	electron	electron	NOUN
fuelectenerg-6011	288	3	devices	device	NOUN
fuelectenerg-6011	288	4	,	,	PUNCT
fuelectenerg-6011	288	5	vol	vol	NOUN
fuelectenerg-6011	288	6	.	.	PROPN
fuelectenerg-6011	288	7	52	52	NUM
fuelectenerg-6011	288	8	,	,	PUNCT
fuelectenerg-6011	288	9	pp	pp	ADJ
fuelectenerg-6011	288	10	.	.	PUNCT
fuelectenerg-6011	289	1	507–511	507–511	NUM
fuelectenerg-6011	289	2	,	,	PUNCT
fuelectenerg-6011	289	3	2005	2005	NUM
fuelectenerg-6011	289	4	.	.	PUNCT
fuelectenerg-6011	290	1	[	[	X
fuelectenerg-6011	290	2	24	24	NUM
fuelectenerg-6011	290	3	]	]	PUNCT
fuelectenerg-6011	290	4	s.	s.	PROPN
fuelectenerg-6011	290	5	m.	m.	PROPN
fuelectenerg-6011	290	6	sze	sze	PROPN
fuelectenerg-6011	290	7	,	,	PUNCT
fuelectenerg-6011	290	8	physics	physics	PROPN
fuelectenerg-6011	290	9	of	of	ADP
fuelectenerg-6011	290	10	semiconductor	semiconductor	NOUN
fuelectenerg-6011	290	11	devices	device	NOUN
fuelectenerg-6011	290	12	.	.	PUNCT
fuelectenerg-6011	291	1	new	new	PROPN
fuelectenerg-6011	291	2	york	york	PROPN
fuelectenerg-6011	291	3	:	:	PUNCT
fuelectenerg-6011	291	4	wiley	wiley	PROPN
fuelectenerg-6011	291	5	,	,	PUNCT
fuelectenerg-6011	291	6	1981	1981	NUM
fuelectenerg-6011	291	7	,	,	PUNCT
fuelectenerg-6011	291	8	chapter	chapter	NOUN
fuelectenerg-6011	291	9	7	7	NUM
fuelectenerg-6011	291	10	.	.	PUNCT
fuelectenerg-6011	292	1	[	[	X
fuelectenerg-6011	292	2	25	25	NUM
fuelectenerg-6011	292	3	]	]	X
fuelectenerg-6011	292	4	h.	h.	PROPN
fuelectenerg-6011	292	5	wong	wong	PROPN
fuelectenerg-6011	292	6	and	and	CCONJ
fuelectenerg-6011	292	7	h.	h.	PROPN
fuelectenerg-6011	292	8	iwai	iwai	PROPN
fuelectenerg-6011	292	9	,	,	PUNCT
fuelectenerg-6011	292	10	“	"	PUNCT
fuelectenerg-6011	292	11	on	on	ADP
fuelectenerg-6011	292	12	the	the	DET
fuelectenerg-6011	292	13	scaling	scale	VERB
fuelectenerg-6011	292	14	issues	issue	NOUN
fuelectenerg-6011	292	15	and	and	CCONJ
fuelectenerg-6011	292	16	high	high	ADJ
fuelectenerg-6011	292	17	-	-	PUNCT
fuelectenerg-6011	292	18	k	k	NOUN
fuelectenerg-6011	292	19	replacement	replacement	NOUN
fuelectenerg-6011	292	20	of	of	ADP
fuelectenerg-6011	292	21	ultrathin	ultrathin	PROPN
fuelectenerg-6011	292	22	gate	gate	NOUN
fuelectenerg-6011	292	23	dielectrics	dielectric	NOUN
fuelectenerg-6011	292	24	for	for	ADP
fuelectenerg-6011	292	25	nanoscale	nanoscale	NOUN
fuelectenerg-6011	292	26	mos	mos	PROPN
fuelectenerg-6011	292	27	transistors	transistor	NOUN
fuelectenerg-6011	292	28	”	"	PUNCT
fuelectenerg-6011	292	29	,	,	PUNCT
fuelectenerg-6011	292	30	microelectron	microelectron	PROPN
fuelectenerg-6011	292	31	.	.	PUNCT
fuelectenerg-6011	293	1	eng	eng	PROPN
fuelectenerg-6011	293	2	.	.	PROPN
fuelectenerg-6011	293	3	,	,	PUNCT
fuelectenerg-6011	293	4	vol	vol	NOUN
fuelectenerg-6011	293	5	.	.	PROPN
fuelectenerg-6011	293	6	83	83	NUM
fuelectenerg-6011	293	7	,	,	PUNCT
fuelectenerg-6011	293	8	pp	pp	ADJ
fuelectenerg-6011	293	9	.	.	PUNCT
fuelectenerg-6011	294	1	1867–1904	1867–1904	NUM
fuelectenerg-6011	294	2	,	,	PUNCT
fuelectenerg-6011	294	3	2006	2006	NUM
fuelectenerg-6011	294	4	.	.	PUNCT
fuelectenerg-6011	295	1	[	[	X
fuelectenerg-6011	295	2	26	26	NUM
fuelectenerg-6011	295	3	]	]	X
fuelectenerg-6011	295	4	h.	h.	PROPN
fuelectenerg-6011	295	5	wong	wong	PROPN
fuelectenerg-6011	295	6	,	,	PUNCT
fuelectenerg-6011	295	7	b.	b.	PROPN
fuelectenerg-6011	295	8	l.	l.	PROPN
fuelectenerg-6011	295	9	yang	yang	PROPN
fuelectenerg-6011	295	10	and	and	CCONJ
fuelectenerg-6011	295	11	y.c	y.c	PROPN
fuelectenerg-6011	295	12	.	.	PROPN
fuelectenerg-6011	295	13	cheng	cheng	PROPN
fuelectenerg-6011	295	14	,	,	PUNCT
fuelectenerg-6011	295	15	“	"	PUNCT
fuelectenerg-6011	295	16	chemistry	chemistry	NOUN
fuelectenerg-6011	295	17	of	of	ADP
fuelectenerg-6011	295	18	silicon	silicon	NOUN
fuelectenerg-6011	295	19	oxide	oxide	NOUN
fuelectenerg-6011	295	20	annealed	anneal	VERB
fuelectenerg-6011	295	21	in	in	ADP
fuelectenerg-6011	295	22	ammonia	ammonia	NOUN
fuelectenerg-6011	295	23	and	and	CCONJ
fuelectenerg-6011	295	24	its	its	PRON
fuelectenerg-6011	295	25	influence	influence	NOUN
fuelectenerg-6011	295	26	on	on	ADP
fuelectenerg-6011	295	27	interface	interface	NOUN
fuelectenerg-6011	295	28	traps	trap	NOUN
fuelectenerg-6011	295	29	”	"	PUNCT
fuelectenerg-6011	295	30	,	,	PUNCT
fuelectenerg-6011	295	31	appl	appl	PROPN
fuelectenerg-6011	295	32	.	.	PUNCT
fuelectenerg-6011	296	1	surf	surf	PROPN
fuelectenerg-6011	296	2	.	.	PUNCT
fuelectenerg-6011	297	1	sci	sci	PROPN
fuelectenerg-6011	297	2	.	.	PROPN
fuelectenerg-6011	297	3	,	,	PUNCT
fuelectenerg-6011	297	4	vol	vol	NOUN
fuelectenerg-6011	297	5	.	.	PROPN
fuelectenerg-6011	297	6	72	72	NUM
fuelectenerg-6011	297	7	,	,	PUNCT
fuelectenerg-6011	297	8	pp	pp	ADJ
fuelectenerg-6011	297	9	.	.	PUNCT
fuelectenerg-6011	298	1	49–54	49–54	NUM
fuelectenerg-6011	298	2	,	,	PUNCT
fuelectenerg-6011	298	3	1993	1993	NUM
fuelectenerg-6011	298	4	.	.	PUNCT
fuelectenerg-6011	299	1	[	[	X
fuelectenerg-6011	299	2	27	27	NUM
fuelectenerg-6011	299	3	]	]	X
fuelectenerg-6011	299	4	e.	e.	PROPN
fuelectenerg-6011	299	5	cartier	cartier	PROPN
fuelectenerg-6011	299	6	and	and	CCONJ
fuelectenerg-6011	299	7	j.	j.	PROPN
fuelectenerg-6011	299	8	h.	h.	PROPN
fuelectenerg-6011	299	9	stathis	stathis	PROPN
fuelectenerg-6011	299	10	,	,	PUNCT
fuelectenerg-6011	299	11	“	"	PUNCT
fuelectenerg-6011	299	12	insulating	insulate	VERB
fuelectenerg-6011	299	13	films	film	NOUN
fuelectenerg-6011	299	14	on	on	ADP
fuelectenerg-6011	299	15	semiconductors	semiconductor	NOUN
fuelectenerg-6011	299	16	”	"	PUNCT
fuelectenerg-6011	299	17	,	,	PUNCT
fuelectenerg-6011	299	18	microelectron	microelectron	PROPN
fuelectenerg-6011	299	19	.	.	PUNCT
fuelectenerg-6011	300	1	eng	eng	PROPN
fuelectenerg-6011	300	2	.	.	PROPN
fuelectenerg-6011	300	3	,	,	PUNCT
fuelectenerg-6011	300	4	vol	vol	NOUN
fuelectenerg-6011	300	5	.	.	PROPN
fuelectenerg-6011	300	6	28	28	NUM
fuelectenerg-6011	300	7	,	,	PUNCT
fuelectenerg-6011	300	8	pp	pp	PROPN
fuelectenerg-6011	300	9	.	.	PUNCT
fuelectenerg-6011	300	10	3–10	3–10	NOUN
fuelectenerg-6011	300	11	,	,	PUNCT
fuelectenerg-6011	300	12	1995	1995	NUM
fuelectenerg-6011	300	13	.	.	PUNCT
fuelectenerg-6011	301	1	[	[	X
fuelectenerg-6011	301	2	28	28	NUM
fuelectenerg-6011	301	3	]	]	X
fuelectenerg-6011	301	4	j.	j.	PROPN
fuelectenerg-6011	301	5	t.	t.	PROPN
fuelectenerg-6011	301	6	yount	yount	PROPN
fuelectenerg-6011	301	7	,	,	PUNCT
fuelectenerg-6011	301	8	p.	p.	PROPN
fuelectenerg-6011	301	9	m.	m.	NOUN
fuelectenerg-6011	301	10	lenahan	lenahan	PROPN
fuelectenerg-6011	301	11	and	and	CCONJ
fuelectenerg-6011	301	12	j.	j.	PROPN
fuelectenerg-6011	301	13	t.	t.	PROPN
fuelectenerg-6011	301	14	krik	krik	PROPN
fuelectenerg-6011	301	15	,	,	PUNCT
fuelectenerg-6011	301	16	“	"	PUNCT
fuelectenerg-6011	301	17	comparison	comparison	NOUN
fuelectenerg-6011	301	18	of	of	ADP
fuelectenerg-6011	301	19	defect	defect	ADJ
fuelectenerg-6011	301	20	structure	structure	NOUN
fuelectenerg-6011	301	21	in	in	ADP
fuelectenerg-6011	301	22	n2oand	n2oand	PROPN
fuelectenerg-6011	301	23	nh3	nh3	ADJ
fuelectenerg-6011	301	24	-	-	PUNCT
fuelectenerg-6011	301	25	nitrided	nitride	VERB
fuelectenerg-6011	301	26	oxide	oxide	NOUN
fuelectenerg-6011	301	27	dielectrics	dielectric	NOUN
fuelectenerg-6011	301	28	”	"	PUNCT
fuelectenerg-6011	301	29	,	,	PUNCT
fuelectenerg-6011	301	30	j.	j.	PROPN
fuelectenerg-6011	301	31	of	of	ADP
fuelectenerg-6011	301	32	appl	appl	PROPN
fuelectenerg-6011	301	33	.	.	PUNCT
fuelectenerg-6011	302	1	phys	phy	NOUN
fuelectenerg-6011	302	2	.	.	PUNCT
fuelectenerg-6011	302	3	,	,	PUNCT
fuelectenerg-6011	302	4	vol	vol	NOUN
fuelectenerg-6011	302	5	.	.	PROPN
fuelectenerg-6011	302	6	76	76	NUM
fuelectenerg-6011	302	7	,	,	PUNCT
fuelectenerg-6011	302	8	pp	pp	ADJ
fuelectenerg-6011	302	9	.	.	PUNCT
fuelectenerg-6011	303	1	1754–1758	1754–1758	NUM
fuelectenerg-6011	303	2	,	,	PUNCT
fuelectenerg-6011	303	3	1994	1994	NUM
fuelectenerg-6011	303	4	.	.	PUNCT
fuelectenerg-6011	304	1	[	[	X
fuelectenerg-6011	304	2	29	29	NUM
fuelectenerg-6011	304	3	]	]	X
fuelectenerg-6011	304	4	i.	i.	PROPN
fuelectenerg-6011	304	5	j.	j.	PROPN
fuelectenerg-6011	304	6	r.	r.	PROPN
fuelectenerg-6011	304	7	baumvol	baumvol	PROPN
fuelectenerg-6011	304	8	,	,	PUNCT
fuelectenerg-6011	304	9	f.	f.	PROPN
fuelectenerg-6011	304	10	c.	c.	PROPN
fuelectenerg-6011	304	11	stedile	stedile	PROPN
fuelectenerg-6011	304	12	,	,	PUNCT
fuelectenerg-6011	304	13	j.	j.	PROPN
fuelectenerg-6011	304	14	j.	j.	PROPN
fuelectenerg-6011	304	15	ganem	ganem	PROPN
fuelectenerg-6011	304	16	,	,	PUNCT
fuelectenerg-6011	304	17	i.	i.	PROPN
fuelectenerg-6011	304	18	trimaille	trimaille	PROPN
fuelectenerg-6011	304	19	and	and	CCONJ
fuelectenerg-6011	304	20	s.	s.	PROPN
fuelectenerg-6011	304	21	rigo	rigo	PROPN
fuelectenerg-6011	304	22	,	,	PUNCT
fuelectenerg-6011	304	23	“	"	PUNCT
fuelectenerg-6011	304	24	thermal	thermal	ADJ
fuelectenerg-6011	304	25	nitridation	nitridation	NOUN
fuelectenerg-6011	304	26	of	of	ADP
fuelectenerg-6011	304	27	sio2	sio2	PROPN
fuelectenerg-6011	304	28	films	film	NOUN
fuelectenerg-6011	304	29	in	in	ADP
fuelectenerg-6011	304	30	ammonia	ammonia	NOUN
fuelectenerg-6011	304	31	:	:	PUNCT
fuelectenerg-6011	304	32	the	the	DET
fuelectenerg-6011	304	33	role	role	NOUN
fuelectenerg-6011	304	34	of	of	ADP
fuelectenerg-6011	304	35	hydrogen	hydrogen	NOUN
fuelectenerg-6011	304	36	”	"	PUNCT
fuelectenerg-6011	304	37	,	,	PUNCT
fuelectenerg-6011	304	38	j.	j.	PROPN
fuelectenerg-6011	304	39	of	of	ADP
fuelectenerg-6011	304	40	electrochem	electrochem	PROPN
fuelectenerg-6011	304	41	.	.	PUNCT
fuelectenerg-6011	305	1	soc	soc	PROPN
fuelectenerg-6011	305	2	.	.	PUNCT
fuelectenerg-6011	305	3	,	,	PUNCT
fuelectenerg-6011	305	4	vol	vol	NOUN
fuelectenerg-6011	305	5	.	.	PUNCT
fuelectenerg-6011	306	1	143	143	NUM
fuelectenerg-6011	306	2	,	,	PUNCT
fuelectenerg-6011	306	3	pp	pp	ADJ
fuelectenerg-6011	306	4	.	.	PUNCT
fuelectenerg-6011	307	1	1426–1434	1426–1434	NUM
fuelectenerg-6011	307	2	,	,	PUNCT
fuelectenerg-6011	307	3	1996	1996	NUM
fuelectenerg-6011	307	4	.	.	PUNCT
fuelectenerg-6011	308	1	[	[	X
fuelectenerg-6011	308	2	30	30	NUM
fuelectenerg-6011	308	3	]	]	PUNCT
fuelectenerg-6011	308	4	s.	s.	PROPN
fuelectenerg-6011	308	5	hwang	hwang	PROPN
fuelectenerg-6011	308	6	,	,	PUNCT
fuelectenerg-6011	308	7	s.	s.	PROPN
fuelectenerg-6011	308	8	jung	jung	PROPN
fuelectenerg-6011	308	9	,	,	PUNCT
fuelectenerg-6011	308	10	k.	k.	PROPN
fuelectenerg-6011	308	11	s.	s.	PROPN
fuelectenerg-6011	308	12	jang	jang	PROPN
fuelectenerg-6011	308	13	,	,	PUNCT
fuelectenerg-6011	308	14	j.	j.	PROPN
fuelectenerg-6011	308	15	i.	i.	PROPN
fuelectenerg-6011	308	16	lee	lee	PROPN
fuelectenerg-6011	308	17	,	,	PUNCT
fuelectenerg-6011	308	18	h.	h.	PROPN
fuelectenerg-6011	308	19	park	park	PROPN
fuelectenerg-6011	308	20	,	,	PUNCT
fuelectenerg-6011	308	21	s.	s.	PROPN
fuelectenerg-6011	308	22	k.	k.	PROPN
fuelectenerg-6011	308	23	dhungel	dhungel	PROPN
fuelectenerg-6011	308	24	and	and	CCONJ
fuelectenerg-6011	308	25	j.	j.	PROPN
fuelectenerg-6011	308	26	yi	yi	PROPN
fuelectenerg-6011	308	27	,	,	PUNCT
fuelectenerg-6011	308	28	“	"	PUNCT
fuelectenerg-6011	308	29	properties	property	NOUN
fuelectenerg-6011	308	30	of	of	ADP
fuelectenerg-6011	308	31	the	the	DET
fuelectenerg-6011	308	32	ultra	ultra	ADJ
fuelectenerg-6011	308	33	-	-	ADJ
fuelectenerg-6011	308	34	thin	thin	ADJ
fuelectenerg-6011	308	35	silicon	silicon	NOUN
fuelectenerg-6011	308	36	-	-	PUNCT
fuelectenerg-6011	308	37	oxynitride	oxynitride	ADJ
fuelectenerg-6011	308	38	films	film	NOUN
fuelectenerg-6011	308	39	deposited	deposit	VERB
fuelectenerg-6011	308	40	by	by	ADP
fuelectenerg-6011	308	41	using	use	VERB
fuelectenerg-6011	308	42	plasma	plasma	NOUN
fuelectenerg-6011	308	43	-	-	PUNCT
fuelectenerg-6011	308	44	assisted	assist	VERB
fuelectenerg-6011	308	45	n2o	n2o	NOUN
fuelectenerg-6011	308	46	oxidation	oxidation	NOUN
fuelectenerg-6011	308	47	for	for	ADP
fuelectenerg-6011	308	48	semiconductor	semiconductor	NOUN
fuelectenerg-6011	308	49	device	device	NOUN
fuelectenerg-6011	308	50	applications	application	NOUN
fuelectenerg-6011	308	51	”	"	PUNCT
fuelectenerg-6011	308	52	,	,	PUNCT
fuelectenerg-6011	308	53	j.	j.	PROPN
fuelectenerg-6011	308	54	of	of	ADP
fuelectenerg-6011	308	55	the	the	DET
fuelectenerg-6011	308	56	korean	korean	ADJ
fuelectenerg-6011	308	57	phys	phys	PROPN
fuelectenerg-6011	308	58	.	.	PUNCT
fuelectenerg-6011	309	1	soc	soc	PROPN
fuelectenerg-6011	309	2	.	.	PUNCT
fuelectenerg-6011	310	1	,	,	PUNCT
fuelectenerg-6011	310	2	vol	vol	NOUN
fuelectenerg-6011	310	3	.	.	PROPN
fuelectenerg-6011	311	1	51	51	NUM
fuelectenerg-6011	311	2	,	,	PUNCT
fuelectenerg-6011	311	3	pp	pp	ADJ
fuelectenerg-6011	311	4	.	.	PUNCT
fuelectenerg-6011	312	1	1096–1099	1096–1099	NUM
fuelectenerg-6011	312	2	,	,	PUNCT
fuelectenerg-6011	312	3	2007	2007	NUM
fuelectenerg-6011	312	4	.	.	PUNCT
fuelectenerg-6011	313	1	[	[	X
fuelectenerg-6011	313	2	31	31	NUM
fuelectenerg-6011	313	3	]	]	X
fuelectenerg-6011	313	4	p.h	p.h	PROPN
fuelectenerg-6011	313	5	.	.	PROPN
fuelectenerg-6011	313	6	yeh	yeh	PROPN
fuelectenerg-6011	313	7	,	,	PUNCT
fuelectenerg-6011	313	8	l.j	l.j	PROPN
fuelectenerg-6011	313	9	.	.	PROPN
fuelectenerg-6011	313	10	chen	chen	PROPN
fuelectenerg-6011	313	11	,	,	PUNCT
fuelectenerg-6011	313	12	p.t	p.t	PROPN
fuelectenerg-6011	313	13	.	.	PROPN
fuelectenerg-6011	313	14	liu	liu	PROPN
fuelectenerg-6011	313	15	,	,	PUNCT
fuelectenerg-6011	313	16	d.y	d.y	PROPN
fuelectenerg-6011	313	17	.	.	PROPN
fuelectenerg-6011	313	18	wang	wang	PROPN
fuelectenerg-6011	313	19	and	and	CCONJ
fuelectenerg-6011	313	20	t.c	t.c	PROPN
fuelectenerg-6011	313	21	.	.	PROPN
fuelectenerg-6011	313	22	chang	chang	PROPN
fuelectenerg-6011	313	23	,	,	PUNCT
fuelectenerg-6011	313	24	“	"	PUNCT
fuelectenerg-6011	313	25	metal	metal	NOUN
fuelectenerg-6011	313	26	nanocrystals	nanocrystal	NOUN
fuelectenerg-6011	313	27	as	as	ADP
fuelectenerg-6011	313	28	charge	charge	NOUN
fuelectenerg-6011	313	29	storage	storage	NOUN
fuelectenerg-6011	313	30	nodes	node	NOUN
fuelectenerg-6011	313	31	for	for	ADP
fuelectenerg-6011	313	32	nonvolatile	nonvolatile	ADJ
fuelectenerg-6011	313	33	memory	memory	NOUN
fuelectenerg-6011	313	34	devices	device	NOUN
fuelectenerg-6011	313	35	”	"	PUNCT
fuelectenerg-6011	313	36	,	,	PUNCT
fuelectenerg-6011	313	37	electrochimica	electrochimica	PROPN
fuelectenerg-6011	313	38	acta	acta	PROPN
fuelectenerg-6011	313	39	(	(	PUNCT
fuelectenerg-6011	313	40	elsevier	elsevier	PROPN
fuelectenerg-6011	313	41	)	)	PUNCT
fuelectenerg-6011	313	42	,	,	PUNCT
fuelectenerg-6011	313	43	vol	vol	NOUN
fuelectenerg-6011	313	44	.	.	PROPN
fuelectenerg-6011	313	45	52	52	NUM
fuelectenerg-6011	313	46	,	,	PUNCT
fuelectenerg-6011	313	47	pp	pp	ADJ
fuelectenerg-6011	313	48	.	.	PUNCT
fuelectenerg-6011	313	49	2920–2926	2920–2926	NUM
fuelectenerg-6011	313	50	,	,	PUNCT
fuelectenerg-6011	313	51	2007	2007	NUM
fuelectenerg-6011	313	52	.	.	PUNCT
fuelectenerg-6011	314	1	[	[	X
fuelectenerg-6011	314	2	32	32	NUM
fuelectenerg-6011	314	3	]	]	PUNCT
fuelectenerg-6011	314	4	w.	w.	PROPN
fuelectenerg-6011	314	5	guan	guan	PROPN
fuelectenerg-6011	314	6	,	,	PUNCT
fuelectenerg-6011	314	7	s.	s.	PROPN
fuelectenerg-6011	314	8	long	long	PROPN
fuelectenerg-6011	314	9	,	,	PUNCT
fuelectenerg-6011	314	10	r.	r.	PROPN
fuelectenerg-6011	314	11	jia	jia	PROPN
fuelectenerg-6011	314	12	,	,	PUNCT
fuelectenerg-6011	314	13	q.	q.	PROPN
fuelectenerg-6011	314	14	liu	liu	PROPN
fuelectenerg-6011	314	15	,	,	PUNCT
fuelectenerg-6011	314	16	y.	y.	PROPN
fuelectenerg-6011	314	17	hu	hu	PROPN
fuelectenerg-6011	314	18	,	,	PUNCT
fuelectenerg-6011	314	19	q.	q.	PROPN
fuelectenerg-6011	314	20	wang	wang	PROPN
fuelectenerg-6011	314	21	and	and	CCONJ
fuelectenerg-6011	314	22	m.	m.	PROPN
fuelectenerg-6011	314	23	liu	liu	PROPN
fuelectenerg-6011	314	24	,	,	PUNCT
fuelectenerg-6011	314	25	“	"	PUNCT
fuelectenerg-6011	314	26	analysis	analysis	NOUN
fuelectenerg-6011	314	27	of	of	ADP
fuelectenerg-6011	314	28	charge	charge	NOUN
fuelectenerg-6011	314	29	retention	retention	NOUN
fuelectenerg-6011	314	30	characteristics	characteristic	NOUN
fuelectenerg-6011	314	31	for	for	ADP
fuelectenerg-6011	314	32	metal	metal	NOUN
fuelectenerg-6011	314	33	and	and	CCONJ
fuelectenerg-6011	314	34	semiconductor	semiconductor	NOUN
fuelectenerg-6011	314	35	nanocrystal	nanocrystal	ADJ
fuelectenerg-6011	314	36	non	non	ADJ
fuelectenerg-6011	314	37	-	-	ADJ
fuelectenerg-6011	314	38	volatile	volatile	ADJ
fuelectenerg-6011	314	39	memories	memory	NOUN
fuelectenerg-6011	314	40	”	"	PUNCT
fuelectenerg-6011	314	41	,	,	PUNCT
fuelectenerg-6011	314	42	in	in	ADP
fuelectenerg-6011	314	43	proceedings	proceeding	NOUN
fuelectenerg-6011	314	44	of	of	ADP
fuelectenerg-6011	314	45	the	the	DET
fuelectenerg-6011	314	46	ieee	ieee	NOUN
fuelectenerg-6011	314	47	,	,	PUNCT
fuelectenerg-6011	314	48	2007	2007	NUM
fuelectenerg-6011	314	49	,	,	PUNCT
fuelectenerg-6011	314	50	pp	pp	ADJ
fuelectenerg-6011	314	51	.	.	PUNCT
fuelectenerg-6011	315	1	141	141	NUM
fuelectenerg-6011	315	2	.	.	PUNCT
fuelectenerg-6011	316	1	[	[	X
fuelectenerg-6011	316	2	33	33	NUM
fuelectenerg-6011	316	3	]	]	PUNCT
fuelectenerg-6011	316	4	w.	w.	PROPN
fuelectenerg-6011	316	5	guan	guan	PROPN
fuelectenerg-6011	316	6	,	,	PUNCT
fuelectenerg-6011	316	7	s.	s.	PROPN
fuelectenerg-6011	316	8	long	long	PROPN
fuelectenerg-6011	316	9	,	,	PUNCT
fuelectenerg-6011	316	10	m.	m.	PROPN
fuelectenerg-6011	316	11	liu	liu	PROPN
fuelectenerg-6011	316	12	,	,	PUNCT
fuelectenerg-6011	316	13	z.	z.	PROPN
fuelectenerg-6011	316	14	li	li	PROPN
fuelectenerg-6011	316	15	,	,	PUNCT
fuelectenerg-6011	316	16	y.	y.	PROPN
fuelectenerg-6011	316	17	hu	hu	PROPN
fuelectenerg-6011	316	18	and	and	CCONJ
fuelectenerg-6011	316	19	qi	qi	PROPN
fuelectenerg-6011	316	20	liu	liu	PROPN
fuelectenerg-6011	316	21	,	,	PUNCT
fuelectenerg-6011	316	22	“	"	PUNCT
fuelectenerg-6011	316	23	fabrication	fabrication	NOUN
fuelectenerg-6011	316	24	and	and	CCONJ
fuelectenerg-6011	316	25	charging	charge	VERB
fuelectenerg-6011	316	26	characteristics	characteristic	NOUN
fuelectenerg-6011	316	27	of	of	ADP
fuelectenerg-6011	316	28	mos	mos	PROPN
fuelectenerg-6011	316	29	capacitor	capacitor	NOUN
fuelectenerg-6011	316	30	structure	structure	NOUN
fuelectenerg-6011	316	31	with	with	ADP
fuelectenerg-6011	316	32	metal	metal	NOUN
fuelectenerg-6011	316	33	nanocrystals	nanocrystal	NOUN
fuelectenerg-6011	316	34	embedded	embed	VERB
fuelectenerg-6011	316	35	in	in	ADP
fuelectenerg-6011	316	36	gate	gate	NOUN
fuelectenerg-6011	316	37	oxide	oxide	NOUN
fuelectenerg-6011	316	38	”	"	PUNCT
fuelectenerg-6011	316	39	,	,	PUNCT
fuelectenerg-6011	316	40	j.	j.	PROPN
fuelectenerg-6011	316	41	of	of	ADP
fuelectenerg-6011	316	42	phys	phys	PROPN
fuelectenerg-6011	316	43	.	.	PUNCT
fuelectenerg-6011	317	1	d	d	X
fuelectenerg-6011	317	2	:	:	PUNCT
fuelectenerg-6011	317	3	appl	appl	PROPN
fuelectenerg-6011	317	4	.	.	PUNCT
fuelectenerg-6011	318	1	phys	phy	NOUN
fuelectenerg-6011	318	2	.	.	PUNCT
fuelectenerg-6011	318	3	,	,	PUNCT
fuelectenerg-6011	318	4	vol	vol	NOUN
fuelectenerg-6011	318	5	.	.	PROPN
fuelectenerg-6011	318	6	40	40	NUM
fuelectenerg-6011	318	7	,	,	PUNCT
fuelectenerg-6011	318	8	pp	pp	ADJ
fuelectenerg-6011	318	9	.	.	PUNCT
fuelectenerg-6011	319	1	2754–2758	2754–2758	NUM
fuelectenerg-6011	319	2	,	,	PUNCT
fuelectenerg-6011	319	3	2007	2007	NUM
fuelectenerg-6011	319	4	.	.	PUNCT
fuelectenerg-6011	320	1	[	[	X
fuelectenerg-6011	320	2	34	34	NUM
fuelectenerg-6011	320	3	]	]	PUNCT
fuelectenerg-6011	320	4	j.	j.	PROPN
fuelectenerg-6011	320	5	y.	y.	PROPN
fuelectenerg-6011	320	6	choi	choi	PROPN
fuelectenerg-6011	320	7	,	,	PUNCT
fuelectenerg-6011	320	8	e.	e.	PROPN
fuelectenerg-6011	320	9	k.	k.	PROPN
fuelectenerg-6011	320	10	lee	lee	PROPN
fuelectenerg-6011	320	11	,	,	PUNCT
fuelectenerg-6011	320	12	y.	y.	PROPN
fuelectenerg-6011	320	13	s.	s.	PROPN
fuelectenerg-6011	320	14	min	min	PROPN
fuelectenerg-6011	320	15	and	and	CCONJ
fuelectenerg-6011	320	16	j.	j.	PROPN
fuelectenerg-6011	320	17	b.	b.	PROPN
fuelectenerg-6011	320	18	park	park	PROPN
fuelectenerg-6011	320	19	,	,	PUNCT
fuelectenerg-6011	320	20	“	"	PUNCT
fuelectenerg-6011	320	21	nonvolatile	nonvolatile	ADJ
fuelectenerg-6011	320	22	memory	memory	NOUN
fuelectenerg-6011	320	23	devices	device	NOUN
fuelectenerg-6011	320	24	fabricated	fabricate	VERB
fuelectenerg-6011	320	25	by	by	ADP
fuelectenerg-6011	320	26	using	use	VERB
fuelectenerg-6011	320	27	colloidal	colloidal	NOUN
fuelectenerg-6011	320	28	ni	ni	PROPN
fuelectenerg-6011	320	29	nanocrystals	nanocrystal	NOUN
fuelectenerg-6011	320	30	”	"	PUNCT
fuelectenerg-6011	320	31	,	,	PUNCT
fuelectenerg-6011	320	32	j.	j.	PROPN
fuelectenerg-6011	320	33	of	of	ADP
fuelectenerg-6011	320	34	the	the	DET
fuelectenerg-6011	320	35	korean	korean	ADJ
fuelectenerg-6011	320	36	phys	phys	PROPN
fuelectenerg-6011	320	37	.	.	PUNCT
fuelectenerg-6011	321	1	soc	soc	PROPN
fuelectenerg-6011	321	2	.	.	PUNCT
fuelectenerg-6011	321	3	,	,	PUNCT
fuelectenerg-6011	321	4	vol	vol	NOUN
fuelectenerg-6011	321	5	.	.	PROPN
fuelectenerg-6011	322	1	50	50	NUM
fuelectenerg-6011	322	2	,	,	PUNCT
fuelectenerg-6011	322	3	pp	pp	ADJ
fuelectenerg-6011	322	4	.	.	PUNCT
fuelectenerg-6011	323	1	49–52	49–52	NUM
fuelectenerg-6011	323	2	,	,	PUNCT
fuelectenerg-6011	323	3	2007	2007	NUM
fuelectenerg-6011	323	4	.	.	PUNCT
fuelectenerg-6011	324	1	flash	flash	NOUN
fuelectenerg-6011	324	2	memory	memory	NOUN
fuelectenerg-6011	324	3	devices	device	NOUN
fuelectenerg-6011	324	4	with	with	ADP
fuelectenerg-6011	324	5	metal	metal	NOUN
fuelectenerg-6011	324	6	floating	float	VERB
fuelectenerg-6011	324	7	gate	gate	NOUN
fuelectenerg-6011	324	8	/	/	SYM
fuelectenerg-6011	324	9	metal	metal	NOUN
fuelectenerg-6011	324	10	nanocrystals	nanocrystal	NOUN
fuelectenerg-6011	324	11	as	as	ADP
fuelectenerg-6011	324	12	the	the	DET
fuelectenerg-6011	324	13	charge	charge	NOUN
fuelectenerg-6011	324	14	storage	storage	NOUN
fuelectenerg-6011	324	15	layer	layer	NOUN
fuelectenerg-6011	324	16	167	167	NUM
fuelectenerg-6011	324	17	[	[	SYM
fuelectenerg-6011	324	18	35	35	NUM
fuelectenerg-6011	324	19	]	]	X
fuelectenerg-6011	324	20	y.	y.	PROPN
fuelectenerg-6011	324	21	li	li	PROPN
fuelectenerg-6011	324	22	and	and	CCONJ
fuelectenerg-6011	324	23	s.	s.	PROPN
fuelectenerg-6011	324	24	liu	liu	PROPN
fuelectenerg-6011	324	25	,	,	PUNCT
fuelectenerg-6011	324	26	“	"	PUNCT
fuelectenerg-6011	324	27	using	use	VERB
fuelectenerg-6011	324	28	different	different	ADJ
fuelectenerg-6011	324	29	work	work	NOUN
fuelectenerg-6011	324	30	function	function	VERB
fuelectenerg-6011	324	31	nanocrystal	nanocrystal	ADJ
fuelectenerg-6011	324	32	materials	material	NOUN
fuelectenerg-6011	324	33	to	to	PART
fuelectenerg-6011	324	34	improve	improve	VERB
fuelectenerg-6011	324	35	the	the	DET
fuelectenerg-6011	324	36	retention	retention	NOUN
fuelectenerg-6011	324	37	characteristics	characteristic	NOUN
fuelectenerg-6011	324	38	of	of	ADP
fuelectenerg-6011	324	39	nonvolatile	nonvolatile	NOUN
fuelectenerg-6011	324	40	memory	memory	NOUN
fuelectenerg-6011	324	41	devices	device	NOUN
fuelectenerg-6011	324	42	”	"	PUNCT
fuelectenerg-6011	324	43	,	,	PUNCT
fuelectenerg-6011	324	44	microelectronics	microelectronic	NOUN
fuelectenerg-6011	324	45	j.	j.	PROPN
fuelectenerg-6011	324	46	,	,	PUNCT
fuelectenerg-6011	324	47	vol	vol	NOUN
fuelectenerg-6011	324	48	.	.	PROPN
fuelectenerg-6011	324	49	40	40	NUM
fuelectenerg-6011	324	50	,	,	PUNCT
fuelectenerg-6011	324	51	pp	pp	ADJ
fuelectenerg-6011	324	52	.	.	PUNCT
fuelectenerg-6011	325	1	92–94	92–94	NUM
fuelectenerg-6011	325	2	,	,	PUNCT
fuelectenerg-6011	325	3	2009	2009	NUM
fuelectenerg-6011	325	4	.	.	PUNCT
fuelectenerg-6011	326	1	[	[	X
fuelectenerg-6011	326	2	36	36	NUM
fuelectenerg-6011	326	3	]	]	X
fuelectenerg-6011	326	4	n.	n.	PROPN
fuelectenerg-6011	326	5	henan	henan	PROPN
fuelectenerg-6011	326	6	,	,	PUNCT
fuelectenerg-6011	326	7	w.	w.	PROPN
fuelectenerg-6011	326	8	liangcai	liangcai	PROPN
fuelectenerg-6011	326	9	,	,	PUNCT
fuelectenerg-6011	326	10	s.	s.	PROPN
fuelectenerg-6011	326	11	zhitang	zhitang	PROPN
fuelectenerg-6011	326	12	,	,	PUNCT
fuelectenerg-6011	326	13	and	and	CCONJ
fuelectenerg-6011	326	14	h.	h.	PROPN
fuelectenerg-6011	326	15	chun	chun	PROPN
fuelectenerg-6011	326	16	,	,	PUNCT
fuelectenerg-6011	326	17	“	"	PUNCT
fuelectenerg-6011	326	18	memory	memory	NOUN
fuelectenerg-6011	326	19	characteristics	characteristic	NOUN
fuelectenerg-6011	326	20	of	of	ADP
fuelectenerg-6011	326	21	an	an	DET
fuelectenerg-6011	326	22	mos	mos	ADJ
fuelectenerg-6011	326	23	capacitor	capacitor	NOUN
fuelectenerg-6011	326	24	structure	structure	NOUN
fuelectenerg-6011	326	25	with	with	ADP
fuelectenerg-6011	326	26	double	double	ADJ
fuelectenerg-6011	326	27	-	-	PUNCT
fuelectenerg-6011	326	28	layer	layer	NOUN
fuelectenerg-6011	326	29	semiconductor	semiconductor	NOUN
fuelectenerg-6011	326	30	and	and	CCONJ
fuelectenerg-6011	326	31	metal	metal	NOUN
fuelectenerg-6011	326	32	heterogeneous	heterogeneous	ADJ
fuelectenerg-6011	326	33	nanocrystals	nanocrystal	NOUN
fuelectenerg-6011	326	34	”	"	PUNCT
fuelectenerg-6011	326	35	,	,	PUNCT
fuelectenerg-6011	326	36	j.	j.	PROPN
fuelectenerg-6011	326	37	of	of	ADP
fuelectenerg-6011	326	38	semiconductors	semiconductor	NOUN
fuelectenerg-6011	326	39	,	,	PUNCT
fuelectenerg-6011	326	40	vol	vol	NOUN
fuelectenerg-6011	326	41	.	.	PROPN
fuelectenerg-6011	326	42	30	30	NUM
fuelectenerg-6011	326	43	,	,	PUNCT
fuelectenerg-6011	326	44	pp	pp	ADJ
fuelectenerg-6011	326	45	.	.	PUNCT
fuelectenerg-6011	326	46	114003(1–5	114003(1–5	NUM
fuelectenerg-6011	326	47	)	)	PUNCT
fuelectenerg-6011	326	48	,	,	PUNCT
fuelectenerg-6011	326	49	2009	2009	NUM
fuelectenerg-6011	326	50	.	.	PUNCT
fuelectenerg-6011	327	1	[	[	X
fuelectenerg-6011	327	2	37	37	NUM
fuelectenerg-6011	327	3	]	]	X
fuelectenerg-6011	327	4	c.	c.	PROPN
fuelectenerg-6011	327	5	lee	lee	PROPN
fuelectenerg-6011	327	6	,	,	PUNCT
fuelectenerg-6011	327	7	a.	a.	PROPN
fuelectenerg-6011	327	8	g.	g.	PROPN
fuelectenerg-6011	327	9	seetharam	seetharam	PROPN
fuelectenerg-6011	327	10	and	and	CCONJ
fuelectenerg-6011	327	11	e.	e.	PROPN
fuelectenerg-6011	327	12	c.	c.	PROPN
fuelectenerg-6011	327	13	kan	kan	PROPN
fuelectenerg-6011	327	14	,	,	PUNCT
fuelectenerg-6011	327	15	“	"	PUNCT
fuelectenerg-6011	327	16	operational	operational	ADJ
fuelectenerg-6011	327	17	and	and	CCONJ
fuelectenerg-6011	327	18	reliability	reliability	NOUN
fuelectenerg-6011	327	19	comparison	comparison	NOUN
fuelectenerg-6011	327	20	of	of	ADP
fuelectenerg-6011	327	21	discrete	discrete	ADJ
fuelectenerg-6011	327	22	-	-	PUNCT
fuelectenerg-6011	327	23	storage	storage	NOUN
fuelectenerg-6011	327	24	nonvolatile	nonvolatile	NOUN
fuelectenerg-6011	327	25	memories	memory	NOUN
fuelectenerg-6011	327	26	:	:	PUNCT
fuelectenerg-6011	327	27	advantages	advantage	NOUN
fuelectenerg-6011	327	28	of	of	ADP
fuelectenerg-6011	327	29	singleand	singleand	NOUN
fuelectenerg-6011	327	30	double	double	ADJ
fuelectenerg-6011	327	31	-	-	PUNCT
fuelectenerg-6011	327	32	layer	layer	NOUN
fuelectenerg-6011	327	33	metal	metal	NOUN
fuelectenerg-6011	327	34	nanocrystals	nanocrystal	NOUN
fuelectenerg-6011	327	35	”	"	PUNCT
fuelectenerg-6011	327	36	,	,	PUNCT
fuelectenerg-6011	327	37	in	in	ADP
fuelectenerg-6011	327	38	proceedings	proceeding	NOUN
fuelectenerg-6011	327	39	of	of	ADP
fuelectenerg-6011	327	40	the	the	DET
fuelectenerg-6011	327	41	iedm	iedm	NOUN
fuelectenerg-6011	327	42	technical	technical	ADJ
fuelectenerg-6011	327	43	digest	digest	PROPN
fuelectenerg-6011	327	44	,	,	PUNCT
fuelectenerg-6011	327	45	2003	2003	NUM
fuelectenerg-6011	327	46	,	,	PUNCT
fuelectenerg-6011	327	47	vol	vol	NOUN
fuelectenerg-6011	327	48	.	.	PROPN
fuelectenerg-6011	327	49	557	557	NUM
fuelectenerg-6011	327	50	,	,	PUNCT
fuelectenerg-6011	327	51	pp	pp	ADJ
fuelectenerg-6011	327	52	.	.	PUNCT
fuelectenerg-6011	328	1	22.6.1–22.6.4	22.6.1–22.6.4	NUM
fuelectenerg-6011	328	2	.	.	PUNCT
fuelectenerg-6011	329	1	[	[	X
fuelectenerg-6011	329	2	38	38	NUM
fuelectenerg-6011	329	3	]	]	PUNCT
fuelectenerg-6011	329	4	z.	z.	PROPN
fuelectenerg-6011	329	5	j.	j.	PROPN
fuelectenerg-6011	329	6	horvath	horvath	PROPN
fuelectenerg-6011	329	7	and	and	CCONJ
fuelectenerg-6011	329	8	p.	p.	PROPN
fuelectenerg-6011	329	9	basa	basa	PROPN
fuelectenerg-6011	329	10	,	,	PUNCT
fuelectenerg-6011	329	11	“	"	PUNCT
fuelectenerg-6011	329	12	nanocrystal	nanocrystal	ADJ
fuelectenerg-6011	329	13	non	non	ADJ
fuelectenerg-6011	329	14	-	-	ADJ
fuelectenerg-6011	329	15	volatile	volatile	ADJ
fuelectenerg-6011	329	16	memory	memory	NOUN
fuelectenerg-6011	329	17	devices	device	NOUN
fuelectenerg-6011	329	18	”	"	PUNCT
fuelectenerg-6011	329	19	,	,	PUNCT
fuelectenerg-6011	329	20	mater	mater	NOUN
fuelectenerg-6011	329	21	.	.	PUNCT
fuelectenerg-6011	329	22	sci	sci	PROPN
fuelectenerg-6011	329	23	.	.	PROPN
fuelectenerg-6011	329	24	forum	forum	PROPN
fuelectenerg-6011	329	25	,	,	PUNCT
fuelectenerg-6011	329	26	vol	vol	NOUN
fuelectenerg-6011	329	27	.	.	PROPN
fuelectenerg-6011	329	28	609	609	NUM
fuelectenerg-6011	329	29	,	,	PUNCT
fuelectenerg-6011	329	30	pp	pp	ADJ
fuelectenerg-6011	329	31	.	.	PUNCT
fuelectenerg-6011	330	1	1–9	1–9	NUM
fuelectenerg-6011	330	2	,	,	PUNCT
fuelectenerg-6011	330	3	2009	2009	NUM
fuelectenerg-6011	330	4	.	.	PUNCT
fuelectenerg-6011	331	1	[	[	X
fuelectenerg-6011	331	2	39	39	NUM
fuelectenerg-6011	331	3	]	]	PUNCT
fuelectenerg-6011	331	4	z.	z.	PROPN
fuelectenerg-6011	331	5	j.	j.	PROPN
fuelectenerg-6011	331	6	horvath	horvath	PROPN
fuelectenerg-6011	331	7	,	,	PUNCT
fuelectenerg-6011	331	8	p.	p.	NOUN
fuelectenerg-6011	331	9	basa	basa	PROPN
fuelectenerg-6011	331	10	,	,	PUNCT
fuelectenerg-6011	331	11	t.	t.	PROPN
fuelectenerg-6011	331	12	jaszi	jaszi	PROPN
fuelectenerg-6011	331	13	,	,	PUNCT
fuelectenerg-6011	331	14	a.e	a.e	PROPN
fuelectenerg-6011	331	15	.	.	PROPN
fuelectenerg-6011	331	16	pap	pap	PROPN
fuelectenerg-6011	331	17	,	,	PUNCT
fuelectenerg-6011	331	18	l.	l.	PROPN
fuelectenerg-6011	331	19	dobos	dobos	PROPN
fuelectenerg-6011	331	20	,	,	PUNCT
fuelectenerg-6011	331	21	b.	b.	PROPN
fuelectenerg-6011	331	22	pecz	pecz	PROPN
fuelectenerg-6011	331	23	,	,	PUNCT
fuelectenerg-6011	331	24	l.	l.	PROPN
fuelectenerg-6011	331	25	toth	toth	PROPN
fuelectenerg-6011	331	26	,	,	PUNCT
fuelectenerg-6011	331	27	p.	p.	NOUN
fuelectenerg-6011	331	28	szollosi	szollosi	PROPN
fuelectenerg-6011	331	29	and	and	CCONJ
fuelectenerg-6011	331	30	k.	k.	PROPN
fuelectenerg-6011	331	31	nagy	nagy	PROPN
fuelectenerg-6011	331	32	,	,	PUNCT
fuelectenerg-6011	331	33	“	"	PUNCT
fuelectenerg-6011	331	34	electrical	electrical	ADJ
fuelectenerg-6011	331	35	and	and	CCONJ
fuelectenerg-6011	331	36	memory	memory	NOUN
fuelectenerg-6011	331	37	properties	property	NOUN
fuelectenerg-6011	331	38	of	of	ADP
fuelectenerg-6011	331	39	si3n4	si3n4	PROPN
fuelectenerg-6011	331	40	mis	mis	PROPN
fuelectenerg-6011	331	41	structures	structure	NOUN
fuelectenerg-6011	331	42	with	with	ADP
fuelectenerg-6011	331	43	embedded	embed	VERB
fuelectenerg-6011	331	44	si	si	PROPN
fuelectenerg-6011	331	45	nanocrystals	nanocrystal	NOUN
fuelectenerg-6011	331	46	”	"	PUNCT
fuelectenerg-6011	331	47	,	,	PUNCT
fuelectenerg-6011	331	48	j.	j.	PROPN
fuelectenerg-6011	331	49	of	of	ADP
fuelectenerg-6011	331	50	nanosci	nanosci	PROPN
fuelectenerg-6011	331	51	.	.	PUNCT
fuelectenerg-6011	331	52	and	and	CCONJ
fuelectenerg-6011	331	53	nanotech	nanotech	PROPN
fuelectenerg-6011	331	54	.	.	PROPN
fuelectenerg-6011	331	55	,	,	PUNCT
fuelectenerg-6011	331	56	vol	vol	NOUN
fuelectenerg-6011	331	57	.	.	PROPN
fuelectenerg-6011	331	58	8	8	NUM
fuelectenerg-6011	331	59	,	,	PUNCT
fuelectenerg-6011	331	60	pp	pp	ADJ
fuelectenerg-6011	331	61	.	.	PUNCT
fuelectenerg-6011	332	1	812–817	812–817	NUM
fuelectenerg-6011	332	2	,	,	PUNCT
fuelectenerg-6011	332	3	2008	2008	NUM
fuelectenerg-6011	332	4	.	.	PUNCT
fuelectenerg-6011	333	1	[	[	X
fuelectenerg-6011	333	2	40	40	NUM
fuelectenerg-6011	333	3	]	]	PUNCT
fuelectenerg-6011	333	4	p.	p.	NOUN
fuelectenerg-6011	333	5	basa	basa	PROPN
fuelectenerg-6011	333	6	,	,	PUNCT
fuelectenerg-6011	333	7	z.	z.	PROPN
fuelectenerg-6011	333	8	j.	j.	PROPN
fuelectenerg-6011	333	9	horvath	horvath	PROPN
fuelectenerg-6011	333	10	,	,	PUNCT
fuelectenerg-6011	333	11	t.	t.	PROPN
fuelectenerg-6011	333	12	jaszi	jaszi	PROPN
fuelectenerg-6011	333	13	,	,	PUNCT
fuelectenerg-6011	333	14	a.e	a.e	PROPN
fuelectenerg-6011	333	15	.	.	PROPN
fuelectenerg-6011	333	16	pap	pap	PROPN
fuelectenerg-6011	333	17	,	,	PUNCT
fuelectenerg-6011	333	18	l.	l.	PROPN
fuelectenerg-6011	333	19	dobos	dobos	PROPN
fuelectenerg-6011	333	20	,	,	PUNCT
fuelectenerg-6011	333	21	b.	b.	PROPN
fuelectenerg-6011	333	22	pecz	pecz	PROPN
fuelectenerg-6011	333	23	,	,	PUNCT
fuelectenerg-6011	333	24	l.	l.	PROPN
fuelectenerg-6011	333	25	toth	toth	PROPN
fuelectenerg-6011	333	26	,	,	PUNCT
fuelectenerg-6011	333	27	and	and	CCONJ
fuelectenerg-6011	333	28	p.	p.	NOUN
fuelectenerg-6011	333	29	szollosi	szollosi	PROPN
fuelectenerg-6011	333	30	,	,	PUNCT
fuelectenerg-6011	333	31	“	"	PUNCT
fuelectenerg-6011	333	32	electrical	electrical	ADJ
fuelectenerg-6011	333	33	and	and	CCONJ
fuelectenerg-6011	333	34	memory	memory	NOUN
fuelectenerg-6011	333	35	properties	property	NOUN
fuelectenerg-6011	333	36	of	of	ADP
fuelectenerg-6011	333	37	silicon	silicon	NOUN
fuelectenerg-6011	333	38	nitride	nitride	NOUN
fuelectenerg-6011	333	39	structures	structure	NOUN
fuelectenerg-6011	333	40	with	with	ADP
fuelectenerg-6011	333	41	embedded	embed	VERB
fuelectenerg-6011	333	42	si	si	PROPN
fuelectenerg-6011	333	43	nanocrystals	nanocrystal	NOUN
fuelectenerg-6011	333	44	”	"	PUNCT
fuelectenerg-6011	333	45	,	,	PUNCT
fuelectenerg-6011	333	46	phys	phy	NOUN
fuelectenerg-6011	333	47	.	.	PUNCT
fuelectenerg-6011	334	1	e	e	X
fuelectenerg-6011	334	2	:	:	PUNCT
fuelectenerg-6011	334	3	lowdimensional	lowdimensional	ADJ
fuelectenerg-6011	334	4	systems	system	NOUN
fuelectenerg-6011	334	5	and	and	CCONJ
fuelectenerg-6011	334	6	nanostructure	nanostructure	NOUN
fuelectenerg-6011	334	7	.	.	PUNCT
fuelectenerg-6011	335	1	,	,	PUNCT
fuelectenerg-6011	335	2	vol	vol	NOUN
fuelectenerg-6011	335	3	.	.	PROPN
fuelectenerg-6011	336	1	38	38	NUM
fuelectenerg-6011	336	2	,	,	PUNCT
fuelectenerg-6011	336	3	pp	pp	ADJ
fuelectenerg-6011	336	4	.	.	PUNCT
fuelectenerg-6011	337	1	71–75	71–75	NOUN
fuelectenerg-6011	337	2	,	,	PUNCT
fuelectenerg-6011	337	3	2007	2007	NUM
fuelectenerg-6011	337	4	.	.	PUNCT
fuelectenerg-6011	338	1	[	[	X
fuelectenerg-6011	338	2	41	41	NUM
fuelectenerg-6011	338	3	]	]	PUNCT
fuelectenerg-6011	338	4	j.	j.	PROPN
fuelectenerg-6011	338	5	h.	h.	PROPN
fuelectenerg-6011	338	6	liao	liao	PROPN
fuelectenerg-6011	338	7	,	,	PUNCT
fuelectenerg-6011	338	8	j.	j.	PROPN
fuelectenerg-6011	338	9	y.	y.	PROPN
fuelectenerg-6011	338	10	hsieh	hsieh	PROPN
fuelectenerg-6011	338	11	,	,	PUNCT
fuelectenerg-6011	338	12	h.	h.	PROPN
fuelectenerg-6011	338	13	j.	j.	PROPN
fuelectenerg-6011	338	14	lin	lin	PROPN
fuelectenerg-6011	338	15	,	,	PUNCT
fuelectenerg-6011	338	16	w.	w.	PROPN
fuelectenerg-6011	338	17	y.	y.	PROPN
fuelectenerg-6011	338	18	tang	tang	PROPN
fuelectenerg-6011	338	19	,	,	PUNCT
fuelectenerg-6011	338	20	c.	c.	PROPN
fuelectenerg-6011	338	21	l.	l.	PROPN
fuelectenerg-6011	338	22	chiang	chiang	PROPN
fuelectenerg-6011	338	23	,	,	PUNCT
fuelectenerg-6011	338	24	y.	y.	PROPN
fuelectenerg-6011	338	25	s.	s.	PROPN
fuelectenerg-6011	338	26	lo	lo	PROPN
fuelectenerg-6011	338	27	,	,	PUNCT
fuelectenerg-6011	338	28	t.	t.	PROPN
fuelectenerg-6011	338	29	b.	b.	PROPN
fuelectenerg-6011	338	30	wu	wu	PROPN
fuelectenerg-6011	338	31	,	,	PUNCT
fuelectenerg-6011	338	32	l.	l.	PROPN
fuelectenerg-6011	338	33	w.	w.	PROPN
fuelectenerg-6011	338	34	yang	yang	PROPN
fuelectenerg-6011	338	35	,	,	PUNCT
fuelectenerg-6011	338	36	t.	t.	PROPN
fuelectenerg-6011	338	37	yang	yang	PROPN
fuelectenerg-6011	338	38	,	,	PUNCT
fuelectenerg-6011	338	39	k.	k.	PROPN
fuelectenerg-6011	338	40	c.	c.	PROPN
fuelectenerg-6011	338	41	chen	chen	PROPN
fuelectenerg-6011	338	42	and	and	CCONJ
fuelectenerg-6011	338	43	c.	c.	PROPN
fuelectenerg-6011	338	44	y.	y.	PROPN
fuelectenerg-6011	338	45	lu	lu	PROPN
fuelectenerg-6011	338	46	,	,	PUNCT
fuelectenerg-6011	338	47	“	"	PUNCT
fuelectenerg-6011	338	48	physical	physical	ADJ
fuelectenerg-6011	338	49	and	and	CCONJ
fuelectenerg-6011	338	50	electrical	electrical	ADJ
fuelectenerg-6011	338	51	characteristics	characteristic	NOUN
fuelectenerg-6011	338	52	of	of	ADP
fuelectenerg-6011	338	53	silicon	silicon	NOUN
fuelectenerg-6011	338	54	oxynitride	oxynitride	ADJ
fuelectenerg-6011	338	55	films	film	NOUN
fuelectenerg-6011	338	56	with	with	ADP
fuelectenerg-6011	338	57	various	various	ADJ
fuelectenerg-6011	338	58	refractive	refractive	ADJ
fuelectenerg-6011	338	59	indices	index	NOUN
fuelectenerg-6011	338	60	”	"	PUNCT
fuelectenerg-6011	338	61	,	,	PUNCT
fuelectenerg-6011	338	62	j.	j.	PROPN
fuelectenerg-6011	338	63	of	of	ADP
fuelectenerg-6011	338	64	phys	phys	PROPN
fuelectenerg-6011	338	65	.	.	PUNCT
fuelectenerg-6011	339	1	d	d	X
fuelectenerg-6011	339	2	:	:	PUNCT
fuelectenerg-6011	339	3	appl	appl	PROPN
fuelectenerg-6011	339	4	.	.	PUNCT
fuelectenerg-6011	340	1	phys	phy	NOUN
fuelectenerg-6011	340	2	.	.	PUNCT
fuelectenerg-6011	340	3	,	,	PUNCT
fuelectenerg-6011	340	4	vol	vol	NOUN
fuelectenerg-6011	340	5	.	.	PROPN
fuelectenerg-6011	340	6	42	42	NUM
fuelectenerg-6011	340	7	,	,	PUNCT
fuelectenerg-6011	340	8	pp	pp	ADJ
fuelectenerg-6011	340	9	.	.	PUNCT
fuelectenerg-6011	341	1	175102(1	175102(1	NUM
fuelectenerg-6011	341	2	-	-	SYM
fuelectenerg-6011	341	3	7	7	NUM
fuelectenerg-6011	341	4	)	)	PUNCT
fuelectenerg-6011	341	5	,	,	PUNCT
fuelectenerg-6011	341	6	2009	2009	NUM
fuelectenerg-6011	341	7	.	.	PUNCT
fuelectenerg-6011	342	1	[	[	X
fuelectenerg-6011	342	2	42	42	NUM
fuelectenerg-6011	342	3	]	]	PUNCT
fuelectenerg-6011	342	4	j.	j.	PROPN
fuelectenerg-6011	342	5	s.	s.	PROPN
fuelectenerg-6011	342	6	lee	lee	PROPN
fuelectenerg-6011	342	7	,	,	PUNCT
fuelectenerg-6011	342	8	“	"	PUNCT
fuelectenerg-6011	342	9	recent	recent	ADJ
fuelectenerg-6011	342	10	progress	progress	NOUN
fuelectenerg-6011	342	11	in	in	ADP
fuelectenerg-6011	342	12	gold	gold	NOUN
fuelectenerg-6011	342	13	nanoparticle	nanoparticle	NOUN
fuelectenerg-6011	342	14	-	-	PUNCT
fuelectenerg-6011	342	15	based	base	VERB
fuelectenerg-6011	342	16	non	non	ADJ
fuelectenerg-6011	342	17	-	-	ADJ
fuelectenerg-6011	342	18	volatile	volatile	ADJ
fuelectenerg-6011	342	19	memory	memory	NOUN
fuelectenerg-6011	342	20	devices	device	NOUN
fuelectenerg-6011	342	21	”	"	PUNCT
fuelectenerg-6011	342	22	,	,	PUNCT
fuelectenerg-6011	342	23	gold	gold	NOUN
fuelectenerg-6011	342	24	bulletin	bulletin	NOUN
fuelectenerg-6011	342	25	,	,	PUNCT
fuelectenerg-6011	342	26	vol	vol	NOUN
fuelectenerg-6011	342	27	.	.	PROPN
fuelectenerg-6011	342	28	43	43	NUM
fuelectenerg-6011	342	29	,	,	PUNCT
fuelectenerg-6011	342	30	pp	pp	ADJ
fuelectenerg-6011	342	31	.	.	PUNCT
fuelectenerg-6011	343	1	189–199	189–199	NUM
fuelectenerg-6011	343	2	,	,	PUNCT
fuelectenerg-6011	343	3	2010	2010	NUM
fuelectenerg-6011	343	4	.	.	PUNCT
fuelectenerg-6011	344	1	[	[	X
fuelectenerg-6011	344	2	43	43	NUM
fuelectenerg-6011	344	3	]	]	PUNCT
fuelectenerg-6011	344	4	s.	s.	PROPN
fuelectenerg-6011	344	5	yang	yang	PROPN
fuelectenerg-6011	344	6	,	,	PUNCT
fuelectenerg-6011	344	7	q.	q.	PROPN
fuelectenerg-6011	344	8	wang	wang	PROPN
fuelectenerg-6011	344	9	,	,	PUNCT
fuelectenerg-6011	344	10	m.	m.	PROPN
fuelectenerg-6011	344	11	zhang	zhang	PROPN
fuelectenerg-6011	344	12	,	,	PUNCT
fuelectenerg-6011	344	13	s.	s.	PROPN
fuelectenerg-6011	344	14	long	long	PROPN
fuelectenerg-6011	344	15	,	,	PUNCT
fuelectenerg-6011	344	16	j.	j.	PROPN
fuelectenerg-6011	344	17	liu	liu	PROPN
fuelectenerg-6011	344	18	and	and	CCONJ
fuelectenerg-6011	344	19	m.	m.	PROPN
fuelectenerg-6011	344	20	liu	liu	PROPN
fuelectenerg-6011	344	21	,	,	PUNCT
fuelectenerg-6011	344	22	“	"	PUNCT
fuelectenerg-6011	344	23	titanium	titanium	NOUN
fuelectenerg-6011	344	24	–	–	PUNCT
fuelectenerg-6011	344	25	tungsten	tungsten	NOUN
fuelectenerg-6011	344	26	nanocrystals	nanocrystal	NOUN
fuelectenerg-6011	344	27	embedded	embed	VERB
fuelectenerg-6011	344	28	in	in	ADP
fuelectenerg-6011	344	29	a	a	DET
fuelectenerg-6011	344	30	sio2	sio2	PROPN
fuelectenerg-6011	344	31	/	/	SYM
fuelectenerg-6011	344	32	al2o3	al2o3	PROPN
fuelectenerg-6011	344	33	gate	gate	NOUN
fuelectenerg-6011	344	34	dielectric	dielectric	ADJ
fuelectenerg-6011	344	35	stack	stack	NOUN
fuelectenerg-6011	344	36	for	for	ADP
fuelectenerg-6011	344	37	low	low	ADJ
fuelectenerg-6011	344	38	-	-	PUNCT
fuelectenerg-6011	344	39	voltage	voltage	NOUN
fuelectenerg-6011	344	40	operation	operation	NOUN
fuelectenerg-6011	344	41	in	in	ADP
fuelectenerg-6011	344	42	non	non	ADJ
fuelectenerg-6011	344	43	-	-	ADJ
fuelectenerg-6011	344	44	volatile	volatile	ADJ
fuelectenerg-6011	344	45	memory	memory	NOUN
fuelectenerg-6011	344	46	”	"	PUNCT
fuelectenerg-6011	344	47	,	,	PUNCT
fuelectenerg-6011	344	48	nanotechnology	nanotechnology	NOUN
fuelectenerg-6011	344	49	,	,	PUNCT
fuelectenerg-6011	344	50	vol	vol	NOUN
fuelectenerg-6011	344	51	.	.	PROPN
fuelectenerg-6011	344	52	21	21	NUM
fuelectenerg-6011	344	53	,	,	PUNCT
fuelectenerg-6011	344	54	pp	pp	ADJ
fuelectenerg-6011	344	55	.	.	PUNCT
fuelectenerg-6011	345	1	245201–245205	245201–245205	NUM
fuelectenerg-6011	345	2	,	,	PUNCT
fuelectenerg-6011	345	3	2010	2010	NUM
fuelectenerg-6011	345	4	.	.	PUNCT
fuelectenerg-6011	346	1	[	[	X
fuelectenerg-6011	346	2	44	44	NUM
fuelectenerg-6011	346	3	]	]	PUNCT
fuelectenerg-6011	346	4	v.	v.	PROPN
fuelectenerg-6011	346	5	mikhelashvili	mikhelashvili	PROPN
fuelectenerg-6011	346	6	,	,	PUNCT
fuelectenerg-6011	346	7	b.	b.	PROPN
fuelectenerg-6011	346	8	meyler	meyler	PROPN
fuelectenerg-6011	346	9	,	,	PUNCT
fuelectenerg-6011	346	10	s.	s.	PROPN
fuelectenerg-6011	346	11	yofis	yofis	PROPN
fuelectenerg-6011	346	12	,	,	PUNCT
fuelectenerg-6011	346	13	j.	j.	PROPN
fuelectenerg-6011	346	14	salzman	salzman	PROPN
fuelectenerg-6011	346	15	,	,	PUNCT
fuelectenerg-6011	346	16	m.	m.	NOUN
fuelectenerg-6011	346	17	garbrecht	garbrecht	NOUN
fuelectenerg-6011	346	18	,	,	PUNCT
fuelectenerg-6011	346	19	t.	t.	PROPN
fuelectenerg-6011	346	20	cohen	cohen	PROPN
fuelectenerg-6011	346	21	-	-	PUNCT
fuelectenerg-6011	346	22	hyams	hyams	PROPN
fuelectenerg-6011	346	23	,	,	PUNCT
fuelectenerg-6011	346	24	w.	w.	PROPN
fuelectenerg-6011	346	25	d.	d.	PROPN
fuelectenerg-6011	346	26	kaplan	kaplan	PROPN
fuelectenerg-6011	346	27	,	,	PUNCT
fuelectenerg-6011	346	28	and	and	CCONJ
fuelectenerg-6011	346	29	g.	g.	PROPN
fuelectenerg-6011	346	30	eisenstein	eisenstein	PROPN
fuelectenerg-6011	346	31	,	,	PUNCT
fuelectenerg-6011	346	32	and	and	CCONJ
fuelectenerg-6011	346	33	eisenstein	eisenstein	PROPN
fuelectenerg-6011	346	34	g.	g.	PROPN
fuelectenerg-6011	346	35	,	,	PUNCT
fuelectenerg-6011	346	36	“	"	PUNCT
fuelectenerg-6011	346	37	a	a	DET
fuelectenerg-6011	346	38	nonvolatile	nonvolatile	ADJ
fuelectenerg-6011	346	39	memory	memory	NOUN
fuelectenerg-6011	346	40	capacitor	capacitor	NOUN
fuelectenerg-6011	346	41	based	base	VERB
fuelectenerg-6011	346	42	on	on	ADP
fuelectenerg-6011	346	43	a	a	DET
fuelectenerg-6011	346	44	double	double	ADJ
fuelectenerg-6011	346	45	gold	gold	NOUN
fuelectenerg-6011	346	46	nanocrystal	nanocrystal	ADJ
fuelectenerg-6011	346	47	storing	storing	NOUN
fuelectenerg-6011	346	48	layer	layer	NOUN
fuelectenerg-6011	346	49	and	and	CCONJ
fuelectenerg-6011	346	50	high	high	ADJ
fuelectenerg-6011	346	51	-	-	PUNCT
fuelectenerg-6011	346	52	k	k	NOUN
fuelectenerg-6011	346	53	dielectric	dielectric	ADJ
fuelectenerg-6011	346	54	tunneling	tunneling	NOUN
fuelectenerg-6011	346	55	and	and	CCONJ
fuelectenerg-6011	346	56	control	control	NOUN
fuelectenerg-6011	346	57	layers	layer	NOUN
fuelectenerg-6011	346	58	”	"	PUNCT
fuelectenerg-6011	346	59	,	,	PUNCT
fuelectenerg-6011	346	60	j.	j.	PROPN
fuelectenerg-6011	346	61	of	of	ADP
fuelectenerg-6011	346	62	the	the	DET
fuelectenerg-6011	346	63	electrochem	electrochem	PROPN
fuelectenerg-6011	346	64	.	.	PUNCT
fuelectenerg-6011	347	1	soc	soc	PROPN
fuelectenerg-6011	347	2	.	.	PUNCT
fuelectenerg-6011	347	3	,	,	PUNCT
fuelectenerg-6011	347	4	vol	vol	NOUN
fuelectenerg-6011	347	5	.	.	PROPN
fuelectenerg-6011	347	6	157	157	NUM
fuelectenerg-6011	347	7	,	,	PUNCT
fuelectenerg-6011	347	8	pp	pp	ADJ
fuelectenerg-6011	347	9	.	.	PUNCT
fuelectenerg-6011	348	1	h463	h463	PROPN
fuelectenerg-6011	348	2	–	–	PUNCT
fuelectenerg-6011	348	3	h469	h469	PROPN
fuelectenerg-6011	348	4	,	,	PUNCT
fuelectenerg-6011	348	5	2010	2010	NUM
fuelectenerg-6011	348	6	.	.	PUNCT
fuelectenerg-6011	349	1	[	[	X
fuelectenerg-6011	349	2	45	45	NUM
fuelectenerg-6011	349	3	]	]	X
fuelectenerg-6011	349	4	g.	g.	PROPN
fuelectenerg-6011	349	5	gay	gay	PROPN
fuelectenerg-6011	349	6	,	,	PUNCT
fuelectenerg-6011	349	7	d.	d.	PROPN
fuelectenerg-6011	349	8	belhachemi	belhachemi	PROPN
fuelectenerg-6011	349	9	,	,	PUNCT
fuelectenerg-6011	349	10	j.	j.	PROPN
fuelectenerg-6011	349	11	p.	p.	PROPN
fuelectenerg-6011	349	12	colonna	colonna	PROPN
fuelectenerg-6011	349	13	,	,	PUNCT
fuelectenerg-6011	349	14	s.	s.	PROPN
fuelectenerg-6011	349	15	minoret	minoret	PROPN
fuelectenerg-6011	349	16	,	,	PUNCT
fuelectenerg-6011	349	17	p.	p.	PROPN
fuelectenerg-6011	349	18	brianceau	brianceau	PROPN
fuelectenerg-6011	349	19	,	,	PUNCT
fuelectenerg-6011	349	20	d.	d.	PROPN
fuelectenerg-6011	349	21	lafond	lafond	PROPN
fuelectenerg-6011	349	22	,	,	PUNCT
fuelectenerg-6011	349	23	t.	t.	NOUN
fuelectenerg-6011	349	24	baron	baron	NOUN
fuelectenerg-6011	349	25	,	,	PUNCT
fuelectenerg-6011	349	26	g.	g.	PROPN
fuelectenerg-6011	349	27	molas	molas	PROPN
fuelectenerg-6011	349	28	,	,	PUNCT
fuelectenerg-6011	349	29	e.	e.	PROPN
fuelectenerg-6011	349	30	jalaguier	jalaguier	PROPN
fuelectenerg-6011	349	31	,	,	PUNCT
fuelectenerg-6011	349	32	a.	a.	NOUN
fuelectenerg-6011	349	33	beaurain	beaurain	NOUN
fuelectenerg-6011	349	34	,	,	PUNCT
fuelectenerg-6011	349	35	b.	b.	PROPN
fuelectenerg-6011	349	36	pelissier	pelissier	PROPN
fuelectenerg-6011	349	37	,	,	PUNCT
fuelectenerg-6011	349	38	v.	v.	ADP
fuelectenerg-6011	349	39	vidal	vidal	PROPN
fuelectenerg-6011	349	40	and	and	CCONJ
fuelectenerg-6011	349	41	b.	b.	PROPN
fuelectenerg-6011	349	42	de	de	PROPN
fuelectenerg-6011	349	43	salvo	salvo	PROPN
fuelectenerg-6011	349	44	,	,	PUNCT
fuelectenerg-6011	349	45	“	"	PUNCT
fuelectenerg-6011	349	46	passivated	passivate	VERB
fuelectenerg-6011	349	47	tin	tin	NOUN
fuelectenerg-6011	349	48	nanocrystals	nanocrystal	NOUN
fuelectenerg-6011	349	49	/	/	SYM
fuelectenerg-6011	349	50	sin	sin	NOUN
fuelectenerg-6011	349	51	trapping	trap	VERB
fuelectenerg-6011	349	52	layer	layer	NOUN
fuelectenerg-6011	349	53	for	for	ADP
fuelectenerg-6011	349	54	enhanced	enhanced	ADJ
fuelectenerg-6011	349	55	erasing	erase	VERB
fuelectenerg-6011	349	56	in	in	ADP
fuelectenerg-6011	349	57	nonvolatile	nonvolatile	ADJ
fuelectenerg-6011	349	58	memory	memory	NOUN
fuelectenerg-6011	349	59	”	"	PUNCT
fuelectenerg-6011	349	60	,	,	PUNCT
fuelectenerg-6011	349	61	appl	appl	NOUN
fuelectenerg-6011	349	62	.	.	PUNCT
fuelectenerg-6011	350	1	phys	phy	NOUN
fuelectenerg-6011	350	2	.	.	PUNCT
fuelectenerg-6011	351	1	lett	lett	PROPN
fuelectenerg-6011	351	2	.	.	PROPN
fuelectenerg-6011	351	3	,	,	PUNCT
fuelectenerg-6011	351	4	vol	vol	NOUN
fuelectenerg-6011	351	5	.	.	PROPN
fuelectenerg-6011	352	1	97	97	NUM
fuelectenerg-6011	352	2	,	,	PUNCT
fuelectenerg-6011	352	3	pp	pp	ADJ
fuelectenerg-6011	352	4	.	.	PUNCT
fuelectenerg-6011	353	1	152112(1–3	152112(1–3	NUM
fuelectenerg-6011	353	2	)	)	PUNCT
fuelectenerg-6011	353	3	,	,	PUNCT
fuelectenerg-6011	353	4	2010	2010	NUM
fuelectenerg-6011	353	5	.	.	PUNCT
fuelectenerg-6011	354	1	[	[	X
fuelectenerg-6011	354	2	46	46	NUM
fuelectenerg-6011	354	3	]	]	PUNCT
fuelectenerg-6011	354	4	l.	l.	PROPN
fuelectenerg-6011	354	5	khomenkova	khomenkova	PROPN
fuelectenerg-6011	354	6	,	,	PUNCT
fuelectenerg-6011	354	7	b.	b.	PROPN
fuelectenerg-6011	354	8	s.	s.	PROPN
fuelectenerg-6011	354	9	sahu	sahu	PROPN
fuelectenerg-6011	354	10	,	,	PUNCT
fuelectenerg-6011	354	11	a.	a.	PROPN
fuelectenerg-6011	354	12	slaoui	slaoui	PROPN
fuelectenerg-6011	354	13	and	and	CCONJ
fuelectenerg-6011	354	14	f.	f.	PROPN
fuelectenerg-6011	354	15	gourbilleau	gourbilleau	PROPN
fuelectenerg-6011	354	16	,	,	PUNCT
fuelectenerg-6011	354	17	“	"	PUNCT
fuelectenerg-6011	354	18	hf	hf	ADV
fuelectenerg-6011	354	19	-	-	PUNCT
fuelectenerg-6011	354	20	based	base	VERB
fuelectenerg-6011	354	21	high	high	ADJ
fuelectenerg-6011	354	22	-	-	PUNCT
fuelectenerg-6011	354	23	k	k	NOUN
fuelectenerg-6011	354	24	materials	material	NOUN
fuelectenerg-6011	354	25	for	for	ADP
fuelectenerg-6011	354	26	si	si	X
fuelectenerg-6011	354	27	nanocrystal	nanocrystal	ADJ
fuelectenerg-6011	354	28	floating	float	VERB
fuelectenerg-6011	354	29	gate	gate	NOUN
fuelectenerg-6011	354	30	memories	memory	NOUN
fuelectenerg-6011	354	31	”	"	PUNCT
fuelectenerg-6011	354	32	,	,	PUNCT
fuelectenerg-6011	354	33	nanoscale	nanoscale	NOUN
fuelectenerg-6011	354	34	res	re	NOUN
fuelectenerg-6011	354	35	.	.	PUNCT
fuelectenerg-6011	355	1	lett	lett	PROPN
fuelectenerg-6011	355	2	.	.	PROPN
fuelectenerg-6011	355	3	,	,	PUNCT
fuelectenerg-6011	355	4	vol	vol	NOUN
fuelectenerg-6011	355	5	.	.	PUNCT
fuelectenerg-6011	356	1	172	172	NUM
fuelectenerg-6011	356	2	,	,	PUNCT
fuelectenerg-6011	356	3	pp	pp	ADJ
fuelectenerg-6011	356	4	.	.	PUNCT
fuelectenerg-6011	357	1	1–8	1–8	NUM
fuelectenerg-6011	357	2	,	,	PUNCT
fuelectenerg-6011	357	3	2011	2011	NUM
fuelectenerg-6011	357	4	.	.	PUNCT
fuelectenerg-6011	358	1	[	[	X
fuelectenerg-6011	358	2	47	47	NUM
fuelectenerg-6011	358	3	]	]	X
fuelectenerg-6011	358	4	g.	g.	PROPN
fuelectenerg-6011	358	5	x.	x.	PROPN
fuelectenerg-6011	358	6	li	li	PROPN
fuelectenerg-6011	358	7	,	,	PUNCT
fuelectenerg-6011	358	8	x.	x.	PROPN
fuelectenerg-6011	358	9	f.	f.	PROPN
fuelectenerg-6011	358	10	chen	chen	PROPN
fuelectenerg-6011	358	11	,	,	PUNCT
fuelectenerg-6011	358	12	w.	w.	PROPN
fuelectenerg-6011	358	13	ren	ren	PROPN
fuelectenerg-6011	358	14	,	,	PUNCT
fuelectenerg-6011	358	15	p.	p.	PROPN
fuelectenerg-6011	358	16	shi	shi	PROPN
fuelectenerg-6011	358	17	,	,	PUNCT
fuelectenerg-6011	358	18	x.	x.	PROPN
fuelectenerg-6011	358	19	q.	q.	PROPN
fuelectenerg-6011	358	20	wu	wu	PROPN
fuelectenerg-6011	358	21	,	,	PUNCT
fuelectenerg-6011	358	22	o.	o.	PROPN
fuelectenerg-6011	358	23	k.	k.	PROPN
fuelectenerg-6011	358	24	tan	tan	PROPN
fuelectenerg-6011	358	25	,	,	PUNCT
fuelectenerg-6011	358	26	w.	w.	PROPN
fuelectenerg-6011	358	27	g.	g.	PROPN
fuelectenerg-6011	358	28	zhu	zhu	PROPN
fuelectenerg-6011	358	29	and	and	CCONJ
fuelectenerg-6011	358	30	x.	x.	NOUN
fuelectenerg-6011	358	31	yao	yao	PROPN
fuelectenerg-6011	358	32	,	,	PUNCT
fuelectenerg-6011	358	33	“	"	PUNCT
fuelectenerg-6011	358	34	hfo2	hfo2	NOUN
fuelectenerg-6011	358	35	-	-	PUNCT
fuelectenerg-6011	358	36	tio2	tio2	NOUN
fuelectenerg-6011	358	37	ultrathin	ultrathin	NOUN
fuelectenerg-6011	358	38	gate	gate	NOUN
fuelectenerg-6011	358	39	dielectric	dielectric	NOUN
fuelectenerg-6011	358	40	by	by	ADP
fuelectenerg-6011	358	41	rf	rf	NOUN
fuelectenerg-6011	358	42	sputtering	sputtering	NOUN
fuelectenerg-6011	358	43	”	"	PUNCT
fuelectenerg-6011	358	44	,	,	PUNCT
fuelectenerg-6011	358	45	ferroelectrics	ferroelectric	NOUN
fuelectenerg-6011	358	46	,	,	PUNCT
fuelectenerg-6011	358	47	vol	vol	NOUN
fuelectenerg-6011	358	48	.	.	PROPN
fuelectenerg-6011	358	49	410	410	NUM
fuelectenerg-6011	358	50	,	,	PUNCT
fuelectenerg-6011	358	51	pp	pp	ADJ
fuelectenerg-6011	358	52	.	.	PUNCT
fuelectenerg-6011	359	1	129–136	129–136	NUM
fuelectenerg-6011	359	2	,	,	PUNCT
fuelectenerg-6011	359	3	2011	2011	NUM
fuelectenerg-6011	359	4	.	.	PUNCT
fuelectenerg-6011	360	1	[	[	X
fuelectenerg-6011	360	2	48	48	NUM
fuelectenerg-6011	360	3	]	]	PUNCT
fuelectenerg-6011	360	4	m.	m.	NOUN
fuelectenerg-6011	360	5	yun	yun	PROPN
fuelectenerg-6011	360	6	,	,	PUNCT
fuelectenerg-6011	360	7	b.	b.	PROPN
fuelectenerg-6011	360	8	ramalingam	ramalingam	PROPN
fuelectenerg-6011	360	9	,	,	PUNCT
fuelectenerg-6011	360	10	and	and	CCONJ
fuelectenerg-6011	360	11	s.	s.	PROPN
fuelectenerg-6011	360	12	gangopadhyay	gangopadhyay	PROPN
fuelectenerg-6011	360	13	,	,	PUNCT
fuelectenerg-6011	360	14	“	"	PUNCT
fuelectenerg-6011	360	15	multi	multi	ADJ
fuelectenerg-6011	360	16	-	-	ADJ
fuelectenerg-6011	360	17	layer	layer	ADJ
fuelectenerg-6011	360	18	pt	pt	NOUN
fuelectenerg-6011	360	19	nanoparticle	nanoparticle	NOUN
fuelectenerg-6011	360	20	embedded	embed	VERB
fuelectenerg-6011	360	21	high	high	ADJ
fuelectenerg-6011	360	22	density	density	NOUN
fuelectenerg-6011	360	23	non	non	ADJ
fuelectenerg-6011	360	24	-	-	ADJ
fuelectenerg-6011	360	25	volatile	volatile	ADJ
fuelectenerg-6011	360	26	memory	memory	NOUN
fuelectenerg-6011	360	27	devices	device	NOUN
fuelectenerg-6011	360	28	”	"	PUNCT
fuelectenerg-6011	360	29	,	,	PUNCT
fuelectenerg-6011	360	30	j.	j.	PROPN
fuelectenerg-6011	360	31	of	of	ADP
fuelectenerg-6011	360	32	the	the	DET
fuelectenerg-6011	360	33	electrochem	electrochem	PROPN
fuelectenerg-6011	360	34	.	.	PUNCT
fuelectenerg-6011	361	1	soc	soc	PROPN
fuelectenerg-6011	361	2	.	.	PUNCT
fuelectenerg-6011	362	1	,	,	PUNCT
fuelectenerg-6011	362	2	vol	vol	NOUN
fuelectenerg-6011	362	3	.	.	PROPN
fuelectenerg-6011	362	4	159	159	NUM
fuelectenerg-6011	362	5	,	,	PUNCT
fuelectenerg-6011	362	6	pp	pp	ADJ
fuelectenerg-6011	362	7	.	.	PUNCT
fuelectenerg-6011	363	1	h393–399	h393–399	PROPN
fuelectenerg-6011	363	2	,	,	PUNCT
fuelectenerg-6011	363	3	2012	2012	NUM
fuelectenerg-6011	363	4	.	.	PUNCT
fuelectenerg-6011	364	1	[	[	X
fuelectenerg-6011	364	2	49	49	NUM
fuelectenerg-6011	364	3	]	]	X
fuelectenerg-6011	364	4	c.	c.	PROPN
fuelectenerg-6011	364	5	t.	t.	PROPN
fuelectenerg-6011	364	6	lin	lin	PROPN
fuelectenerg-6011	364	7	,	,	PUNCT
fuelectenerg-6011	364	8	j.	j.	PROPN
fuelectenerg-6011	364	9	c.	c.	PROPN
fuelectenerg-6011	364	10	wang	wang	PROPN
fuelectenerg-6011	364	11	,	,	PUNCT
fuelectenerg-6011	364	12	p.	p.	PROPN
fuelectenerg-6011	364	13	w.	w.	PROPN
fuelectenerg-6011	364	14	huang	huang	PROPN
fuelectenerg-6011	364	15	,	,	PUNCT
fuelectenerg-6011	364	16	y.	y.	PROPN
fuelectenerg-6011	364	17	y.	y.	PROPN
fuelectenerg-6011	364	18	chen	chen	PROPN
fuelectenerg-6011	364	19	and	and	CCONJ
fuelectenerg-6011	364	20	l.	l.	PROPN
fuelectenerg-6011	364	21	c.	c.	PROPN
fuelectenerg-6011	364	22	chang	chang	PROPN
fuelectenerg-6011	364	23	,	,	PUNCT
fuelectenerg-6011	364	24	“	"	PUNCT
fuelectenerg-6011	364	25	performance	performance	NOUN
fuelectenerg-6011	364	26	revelation	revelation	NOUN
fuelectenerg-6011	364	27	and	and	CCONJ
fuelectenerg-6011	364	28	optimization	optimization	NOUN
fuelectenerg-6011	364	29	of	of	ADP
fuelectenerg-6011	364	30	gold	gold	ADJ
fuelectenerg-6011	364	31	nanocrystal	nanocrystal	NOUN
fuelectenerg-6011	364	32	for	for	ADP
fuelectenerg-6011	364	33	future	future	ADJ
fuelectenerg-6011	364	34	nonvolatile	nonvolatile	ADJ
fuelectenerg-6011	364	35	memory	memory	NOUN
fuelectenerg-6011	364	36	application	application	NOUN
fuelectenerg-6011	364	37	”	"	PUNCT
fuelectenerg-6011	364	38	,	,	PUNCT
fuelectenerg-6011	364	39	japanese	japanese	ADJ
fuelectenerg-6011	364	40	j.	j.	PROPN
fuelectenerg-6011	364	41	of	of	ADP
fuelectenerg-6011	364	42	appl	appl	PROPN
fuelectenerg-6011	364	43	.	.	PUNCT
fuelectenerg-6011	365	1	phys	phy	NOUN
fuelectenerg-6011	365	2	.	.	PUNCT
fuelectenerg-6011	365	3	,	,	PUNCT
fuelectenerg-6011	365	4	vol	vol	NOUN
fuelectenerg-6011	365	5	.	.	PROPN
fuelectenerg-6011	365	6	52	52	NUM
fuelectenerg-6011	365	7	,	,	PUNCT
fuelectenerg-6011	365	8	pp	pp	ADJ
fuelectenerg-6011	365	9	.	.	PUNCT
fuelectenerg-6011	365	10	04cj09(1–5	04cj09(1–5	NOUN
fuelectenerg-6011	365	11	)	)	PUNCT
fuelectenerg-6011	365	12	,	,	PUNCT
fuelectenerg-6011	365	13	2013	2013	NUM
fuelectenerg-6011	365	14	.	.	PUNCT
fuelectenerg-6011	366	1	[	[	X
fuelectenerg-6011	366	2	50	50	NUM
fuelectenerg-6011	366	3	]	]	PUNCT
fuelectenerg-6011	366	4	j.	j.	PROPN
fuelectenerg-6011	366	5	seo	seo	PROPN
fuelectenerg-6011	366	6	,	,	PUNCT
fuelectenerg-6011	366	7	j.	j.	PROPN
fuelectenerg-6011	366	8	y.	y.	PROPN
fuelectenerg-6011	366	9	kim	kim	PROPN
fuelectenerg-6011	366	10	,	,	PUNCT
fuelectenerg-6011	366	11	y.	y.	PROPN
fuelectenerg-6011	366	12	b.	b.	PROPN
fuelectenerg-6011	366	13	kim	kim	PROPN
fuelectenerg-6011	366	14	,	,	PUNCT
fuelectenerg-6011	366	15	d.	d.	PROPN
fuelectenerg-6011	366	16	w.	w.	PROPN
fuelectenerg-6011	366	17	kim	kim	PROPN
fuelectenerg-6011	366	18	,	,	PUNCT
fuelectenerg-6011	366	19	h.	h.	PROPN
fuelectenerg-6011	366	20	kim	kim	PROPN
fuelectenerg-6011	366	21	,	,	PUNCT
fuelectenerg-6011	366	22	h.	h.	PROPN
fuelectenerg-6011	366	23	jo	jo	PROPN
fuelectenerg-6011	366	24	and	and	CCONJ
fuelectenerg-6011	366	25	d.	d.	PROPN
fuelectenerg-6011	366	26	k.	k.	PROPN
fuelectenerg-6011	366	27	choi	choi	PROPN
fuelectenerg-6011	366	28	,	,	PUNCT
fuelectenerg-6011	366	29	“	"	PUNCT
fuelectenerg-6011	366	30	multi	multi	ADJ
fuelectenerg-6011	366	31	-	-	ADJ
fuelectenerg-6011	366	32	level	level	ADJ
fuelectenerg-6011	366	33	storage	storage	NOUN
fuelectenerg-6011	366	34	in	in	ADP
fuelectenerg-6011	366	35	a	a	DET
fuelectenerg-6011	366	36	nano	nano	NOUN
fuelectenerg-6011	366	37	-	-	PUNCT
fuelectenerg-6011	366	38	floating	float	VERB
fuelectenerg-6011	366	39	gate	gate	NOUN
fuelectenerg-6011	366	40	mos	mos	PROPN
fuelectenerg-6011	366	41	capacitor	capacitor	NOUN
fuelectenerg-6011	366	42	using	use	VERB
fuelectenerg-6011	366	43	a	a	DET
fuelectenerg-6011	366	44	stepped	step	VERB
fuelectenerg-6011	366	45	control	control	NOUN
fuelectenerg-6011	366	46	oxide	oxide	NOUN
fuelectenerg-6011	366	47	”	"	PUNCT
fuelectenerg-6011	366	48	,	,	PUNCT
fuelectenerg-6011	366	49	microelectron	microelectron	NOUN
fuelectenerg-6011	366	50	.	.	PUNCT
fuelectenerg-6011	367	1	reliability	reliability	NOUN
fuelectenerg-6011	367	2	,	,	PUNCT
fuelectenerg-6011	367	3	vol	vol	NOUN
fuelectenerg-6011	367	4	.	.	PROPN
fuelectenerg-6011	367	5	53	53	NUM
fuelectenerg-6011	367	6	,	,	PUNCT
fuelectenerg-6011	367	7	pp	pp	ADJ
fuelectenerg-6011	367	8	.	.	PUNCT
fuelectenerg-6011	368	1	528–532	528–532	NUM
fuelectenerg-6011	368	2	,	,	PUNCT
fuelectenerg-6011	368	3	2013	2013	NUM
fuelectenerg-6011	368	4	.	.	PUNCT
fuelectenerg-6011	369	1	[	[	X
fuelectenerg-6011	369	2	51	51	NUM
fuelectenerg-6011	369	3	]	]	PUNCT
fuelectenerg-6011	369	4	w.	w.	PROPN
fuelectenerg-6011	369	5	c.	c.	PROPN
fuelectenerg-6011	369	6	shih	shih	PROPN
fuelectenerg-6011	369	7	,	,	PUNCT
fuelectenerg-6011	369	8	c.	c.	PROPN
fuelectenerg-6011	369	9	h.	h.	PROPN
fuelectenerg-6011	369	10	cheng	cheng	PROPN
fuelectenerg-6011	369	11	,	,	PUNCT
fuelectenerg-6011	369	12	j.	j.	PROPN
fuelectenerg-6011	369	13	y.	y.	PROPN
fuelectenerg-6011	369	14	m.	m.	PROPN
fuelectenerg-6011	369	15	lee	lee	PROPN
fuelectenerg-6011	369	16	and	and	CCONJ
fuelectenerg-6011	369	17	f.	f.	PROPN
fuelectenerg-6011	369	18	c.	c.	PROPN
fuelectenerg-6011	369	19	chiu	chiu	PROPN
fuelectenerg-6011	369	20	“	"	PUNCT
fuelectenerg-6011	369	21	charge	charge	NOUN
fuelectenerg-6011	369	22	-	-	PUNCT
fuelectenerg-6011	369	23	trapping	trap	VERB
fuelectenerg-6011	369	24	devices	device	NOUN
fuelectenerg-6011	369	25	using	use	VERB
fuelectenerg-6011	369	26	multilayered	multilayered	ADJ
fuelectenerg-6011	369	27	dielectrics	dielectric	NOUN
fuelectenerg-6011	369	28	for	for	ADP
fuelectenerg-6011	369	29	nonvolatile	nonvolatile	NOUN
fuelectenerg-6011	369	30	memory	memory	NOUN
fuelectenerg-6011	369	31	applications	application	NOUN
fuelectenerg-6011	369	32	”	"	PUNCT
fuelectenerg-6011	369	33	,	,	PUNCT
fuelectenerg-6011	369	34	advances	advance	VERB
fuelectenerg-6011	369	35	in	in	ADP
fuelectenerg-6011	369	36	mater	mater	NOUN
fuelectenerg-6011	369	37	.	.	PUNCT
fuelectenerg-6011	370	1	sci	sci	PROPN
fuelectenerg-6011	370	2	.	.	PROPN
fuelectenerg-6011	370	3	and	and	CCONJ
fuelectenerg-6011	370	4	eng	eng	PROPN
fuelectenerg-6011	370	5	.	.	PROPN
fuelectenerg-6011	370	6	,	,	PUNCT
fuelectenerg-6011	370	7	pp.1–5	pp.1–5	NOUN
fuelectenerg-6011	370	8	,	,	PUNCT
fuelectenerg-6011	370	9	2013	2013	NUM
fuelectenerg-6011	370	10	.	.	PUNCT
fuelectenerg-6011	371	1	[	[	X
fuelectenerg-6011	371	2	52	52	NUM
fuelectenerg-6011	371	3	]	]	PUNCT
fuelectenerg-6011	371	4	g.	g.	PROPN
fuelectenerg-6011	371	5	chen	chen	PROPN
fuelectenerg-6011	371	6	,	,	PUNCT
fuelectenerg-6011	371	7	z.	z.	PROPN
fuelectenerg-6011	371	8	huo	huo	PROPN
fuelectenerg-6011	371	9	,	,	PUNCT
fuelectenerg-6011	371	10	l.	l.	PROPN
fuelectenerg-6011	371	11	jin	jin	PROPN
fuelectenerg-6011	371	12	,	,	PUNCT
fuelectenerg-6011	371	13	y.	y.	PROPN
fuelectenerg-6011	371	14	han	han	PROPN
fuelectenerg-6011	371	15	,	,	PUNCT
fuelectenerg-6011	371	16	x.	x.	PROPN
fuelectenerg-6011	371	17	li	li	PROPN
fuelectenerg-6011	371	18	,	,	PUNCT
fuelectenerg-6011	371	19	su	su	PROPN
fuelectenerg-6011	371	20	liu	liu	PROPN
fuelectenerg-6011	371	21	and	and	CCONJ
fuelectenerg-6011	371	22	m.	m.	PROPN
fuelectenerg-6011	371	23	liu	liu	PROPN
fuelectenerg-6011	371	24	,	,	PUNCT
fuelectenerg-6011	371	25	“	"	PUNCT
fuelectenerg-6011	371	26	metal	metal	NOUN
fuelectenerg-6011	371	27	floating	float	VERB
fuelectenerg-6011	371	28	gate	gate	NOUN
fuelectenerg-6011	371	29	memory	memory	NOUN
fuelectenerg-6011	371	30	device	device	NOUN
fuelectenerg-6011	371	31	with	with	ADP
fuelectenerg-6011	371	32	sio2	sio2	PROPN
fuelectenerg-6011	371	33	/	/	SYM
fuelectenerg-6011	371	34	hfo2	hfo2	NOUN
fuelectenerg-6011	371	35	dual	dual	ADJ
fuelectenerg-6011	371	36	-	-	PUNCT
fuelectenerg-6011	371	37	layer	layer	NOUN
fuelectenerg-6011	371	38	as	as	ADP
fuelectenerg-6011	371	39	engineered	engineer	VERB
fuelectenerg-6011	371	40	tunneling	tunneling	NOUN
fuelectenerg-6011	371	41	barrier	barrier	NOUN
fuelectenerg-6011	371	42	”	"	PUNCT
fuelectenerg-6011	371	43	,	,	PUNCT
fuelectenerg-6011	371	44	ieee	ieee	NOUN
fuelectenerg-6011	371	45	electron	electron	NOUN
fuelectenerg-6011	371	46	device	device	NOUN
fuelectenerg-6011	371	47	lett	lett	PROPN
fuelectenerg-6011	371	48	.	.	PUNCT
fuelectenerg-6011	371	49	,	,	PUNCT
fuelectenerg-6011	371	50	vol	vol	NOUN
fuelectenerg-6011	371	51	.	.	PROPN
fuelectenerg-6011	371	52	35	35	NUM
fuelectenerg-6011	371	53	,	,	PUNCT
fuelectenerg-6011	371	54	pp	pp	ADJ
fuelectenerg-6011	371	55	.	.	PUNCT
fuelectenerg-6011	372	1	744–746	744–746	NUM
fuelectenerg-6011	372	2	,	,	PUNCT
fuelectenerg-6011	372	3	2014	2014	NUM
fuelectenerg-6011	372	4	.	.	PUNCT
fuelectenerg-6011	373	1	[	[	X
fuelectenerg-6011	373	2	53	53	NUM
fuelectenerg-6011	373	3	]	]	X
fuelectenerg-6011	373	4	g.	g.	PROPN
fuelectenerg-6011	373	5	d.	d.	PROPN
fuelectenerg-6011	373	6	wilk	wilk	PROPN
fuelectenerg-6011	373	7	,	,	PUNCT
fuelectenerg-6011	373	8	r.	r.	PROPN
fuelectenerg-6011	373	9	m.	m.	PROPN
fuelectenerg-6011	373	10	wallace	wallace	PROPN
fuelectenerg-6011	373	11	and	and	CCONJ
fuelectenerg-6011	373	12	j.	j.	PROPN
fuelectenerg-6011	373	13	m.	m.	PROPN
fuelectenerg-6011	373	14	anthony	anthony	PROPN
fuelectenerg-6011	373	15	,	,	PUNCT
fuelectenerg-6011	373	16	“	"	PUNCT
fuelectenerg-6011	373	17	h	h	PROPN
fuelectenerg-6011	373	18	-	-	PUNCT
fuelectenerg-6011	373	19	k	k	PROPN
fuelectenerg-6011	373	20	gate	gate	PROPN
fuelectenerg-6011	373	21	dielectrics	dielectric	NOUN
fuelectenerg-6011	373	22	:	:	PUNCT
fuelectenerg-6011	373	23	current	current	ADJ
fuelectenerg-6011	373	24	status	status	NOUN
fuelectenerg-6011	373	25	and	and	CCONJ
fuelectenerg-6011	373	26	materials	material	NOUN
fuelectenerg-6011	373	27	properties	property	NOUN
fuelectenerg-6011	373	28	considerations	consideration	NOUN
fuelectenerg-6011	373	29	”	"	PUNCT
fuelectenerg-6011	373	30	,	,	PUNCT
fuelectenerg-6011	373	31	j.	j.	PROPN
fuelectenerg-6011	373	32	of	of	ADP
fuelectenerg-6011	373	33	appl	appl	PROPN
fuelectenerg-6011	373	34	.	.	PUNCT
fuelectenerg-6011	374	1	phys	phy	NOUN
fuelectenerg-6011	374	2	.	.	PUNCT
fuelectenerg-6011	374	3	,	,	PUNCT
fuelectenerg-6011	374	4	vol	vol	NOUN
fuelectenerg-6011	374	5	.	.	PROPN
fuelectenerg-6011	374	6	89	89	NUM
fuelectenerg-6011	374	7	,	,	PUNCT
fuelectenerg-6011	374	8	pp	pp	ADJ
fuelectenerg-6011	374	9	.	.	PUNCT
fuelectenerg-6011	374	10	5243–5255	5243–5255	NUM
fuelectenerg-6011	374	11	,	,	PUNCT
fuelectenerg-6011	374	12	2001	2001	NUM
fuelectenerg-6011	374	13	.	.	PUNCT
fuelectenerg-6011	375	1	[	[	X
fuelectenerg-6011	375	2	54	54	NUM
fuelectenerg-6011	375	3	]	]	PUNCT
fuelectenerg-6011	375	4	c.	c.	PROPN
fuelectenerg-6011	375	5	zhao	zhao	PROPN
fuelectenerg-6011	375	6	,	,	PUNCT
fuelectenerg-6011	375	7	c.	c.	PROPN
fuelectenerg-6011	375	8	z.	z.	PROPN
fuelectenerg-6011	375	9	zhao	zhao	PROPN
fuelectenerg-6011	375	10	,	,	PUNCT
fuelectenerg-6011	375	11	s.	s.	PROPN
fuelectenerg-6011	375	12	taylor	taylor	PROPN
fuelectenerg-6011	375	13	and	and	CCONJ
fuelectenerg-6011	375	14	p.	p.	PROPN
fuelectenerg-6011	375	15	r.	r.	PROPN
fuelectenerg-6011	375	16	chalker	chalker	PROPN
fuelectenerg-6011	375	17	,	,	PUNCT
fuelectenerg-6011	375	18	“	"	PUNCT
fuelectenerg-6011	375	19	review	review	NOUN
fuelectenerg-6011	375	20	on	on	ADP
fuelectenerg-6011	375	21	non	non	ADJ
fuelectenerg-6011	375	22	-	-	ADJ
fuelectenerg-6011	375	23	volatile	volatile	ADJ
fuelectenerg-6011	375	24	memory	memory	NOUN
fuelectenerg-6011	375	25	with	with	ADP
fuelectenerg-6011	375	26	high	high	ADJ
fuelectenerg-6011	375	27	-	-	PUNCT
fuelectenerg-6011	375	28	k	k	NOUN
fuelectenerg-6011	375	29	dielectrics	dielectric	NOUN
fuelectenerg-6011	375	30	:	:	PUNCT
fuelectenerg-6011	375	31	flash	flash	VERB
fuelectenerg-6011	375	32	for	for	ADP
fuelectenerg-6011	375	33	generation	generation	NOUN
fuelectenerg-6011	375	34	beyond	beyond	ADP
fuelectenerg-6011	375	35	32	32	NUM
fuelectenerg-6011	375	36	nm	nm	NOUN
fuelectenerg-6011	375	37	”	"	PUNCT
fuelectenerg-6011	375	38	,	,	PUNCT
fuelectenerg-6011	375	39	mater	mater	NOUN
fuelectenerg-6011	375	40	.	.	PUNCT
fuelectenerg-6011	375	41	,	,	PUNCT
fuelectenerg-6011	375	42	vol	vol	NOUN
fuelectenerg-6011	375	43	.	.	PROPN
fuelectenerg-6011	376	1	7	7	NUM
fuelectenerg-6011	376	2	,	,	PUNCT
fuelectenerg-6011	376	3	pp	pp	ADJ
fuelectenerg-6011	376	4	.	.	PUNCT
fuelectenerg-6011	377	1	5117–5145	5117–5145	NUM
fuelectenerg-6011	377	2	,	,	PUNCT
fuelectenerg-6011	377	3	2014	2014	NUM
fuelectenerg-6011	377	4	.	.	PUNCT
fuelectenerg-6011	378	1	[	[	X
fuelectenerg-6011	378	2	55	55	NUM
fuelectenerg-6011	378	3	]	]	X
fuelectenerg-6011	378	4	c.	c.	PROPN
fuelectenerg-6011	378	5	yan	yan	PROPN
fuelectenerg-6011	378	6	,	,	PUNCT
fuelectenerg-6011	378	7	j.	j.	PROPN
fuelectenerg-6011	378	8	wen	wen	PROPN
fuelectenerg-6011	378	9	,	,	PUNCT
fuelectenerg-6011	378	10	p.	p.	NOUN
fuelectenerg-6011	378	11	lin	lin	PROPN
fuelectenerg-6011	378	12	and	and	CCONJ
fuelectenerg-6011	378	13	z.	z.	PROPN
fuelectenerg-6011	378	14	sun	sun	PROPN
fuelectenerg-6011	378	15	,	,	PUNCT
fuelectenerg-6011	378	16	“	"	PUNCT
fuelectenerg-6011	378	17	a	a	DET
fuelectenerg-6011	378	18	tunneling	tunnel	VERB
fuelectenerg-6011	378	19	dielectric	dielectric	ADJ
fuelectenerg-6011	378	20	layer	layer	NOUN
fuelectenerg-6011	378	21	free	free	ADJ
fuelectenerg-6011	378	22	floating	float	VERB
fuelectenerg-6011	378	23	gate	gate	NOUN
fuelectenerg-6011	378	24	nonvolatile	nonvolatile	NOUN
fuelectenerg-6011	378	25	memory	memory	NOUN
fuelectenerg-6011	378	26	employing	employ	VERB
fuelectenerg-6011	378	27	type	type	NOUN
fuelectenerg-6011	378	28	-	-	PUNCT
fuelectenerg-6011	378	29	i	i	PRON
fuelectenerg-6011	378	30	core	core	NOUN
fuelectenerg-6011	378	31	–	–	PUNCT
fuelectenerg-6011	378	32	shell	shell	ADJ
fuelectenerg-6011	378	33	quantum	quantum	NOUN
fuelectenerg-6011	378	34	dots	dot	NOUN
fuelectenerg-6011	378	35	as	as	ADP
fuelectenerg-6011	378	36	discrete	discrete	ADJ
fuelectenerg-6011	378	37	charge	charge	NOUN
fuelectenerg-6011	378	38	-	-	PUNCT
fuelectenerg-6011	378	39	trapping	trap	VERB
fuelectenerg-6011	378	40	/	/	SYM
fuelectenerg-6011	378	41	tunneling	tunneling	NOUN
fuelectenerg-6011	378	42	centers	center	NOUN
fuelectenerg-6011	378	43	”	"	PUNCT
fuelectenerg-6011	378	44	,	,	PUNCT
fuelectenerg-6011	378	45	nano	nano	NOUN
fuelectenerg-6011	378	46	-	-	PUNCT
fuelectenerg-6011	378	47	micro	micro	ADJ
fuelectenerg-6011	378	48	small	small	ADJ
fuelectenerg-6011	378	49	,	,	PUNCT
fuelectenerg-6011	378	50	vol.15	vol.15	NOUN
fuelectenerg-6011	378	51	,	,	PUNCT
fuelectenerg-6011	378	52	pp.1804156	pp.1804156	PROPN
fuelectenerg-6011	378	53	(	(	PUNCT
fuelectenerg-6011	378	54	1–8	1–8	NOUN
fuelectenerg-6011	378	55	)	)	PUNCT
fuelectenerg-6011	378	56	,	,	PUNCT
fuelectenerg-6011	378	57	2019	2019	NUM
fuelectenerg-6011	378	58	.	.	PUNCT
fuelectenerg-6011	379	1	[	[	X
fuelectenerg-6011	379	2	56	56	NUM
fuelectenerg-6011	379	3	]	]	X
fuelectenerg-6011	379	4	s.	s.	PROPN
fuelectenerg-6011	379	5	wang	wang	PROPN
fuelectenerg-6011	379	6	,	,	PUNCT
fuelectenerg-6011	379	7	c.	c.	PROPN
fuelectenerg-6011	379	8	he	he	PROPN
fuelectenerg-6011	379	9	,	,	PUNCT
fuelectenerg-6011	379	10	j.	j.	PROPN
fuelectenerg-6011	379	11	tang	tang	PROPN
fuelectenerg-6011	379	12	,	,	PUNCT
fuelectenerg-6011	379	13	x.	x.	PROPN
fuelectenerg-6011	379	14	lu	lu	PROPN
fuelectenerg-6011	379	15	,	,	PUNCT
fuelectenerg-6011	379	16	c.	c.	PROPN
fuelectenerg-6011	379	17	shen	shen	PROPN
fuelectenerg-6011	379	18	,	,	PUNCT
fuelectenerg-6011	379	19	h.	h.	PROPN
fuelectenerg-6011	379	20	yu	yu	PROPN
fuelectenerg-6011	379	21	,	,	PUNCT
fuelectenerg-6011	379	22	l.	l.	PROPN
fuelectenerg-6011	379	23	du	du	PROPN
fuelectenerg-6011	379	24	,	,	PUNCT
fuelectenerg-6011	379	25	j.	j.	PROPN
fuelectenerg-6011	379	26	li	li	PROPN
fuelectenerg-6011	379	27	,	,	PUNCT
fuelectenerg-6011	379	28	r.	r.	PROPN
fuelectenerg-6011	379	29	yang	yang	PROPN
fuelectenerg-6011	379	30	,	,	PUNCT
fuelectenerg-6011	379	31	d.	d.	PROPN
fuelectenerg-6011	379	32	shi	shi	PROPN
fuelectenerg-6011	379	33	and	and	CCONJ
fuelectenerg-6011	379	34	g.	g.	PROPN
fuelectenerg-6011	379	35	zhang	zhang	PROPN
fuelectenerg-6011	379	36	,	,	PUNCT
fuelectenerg-6011	379	37	“	"	PUNCT
fuelectenerg-6011	379	38	new	new	ADJ
fuelectenerg-6011	379	39	floating	float	VERB
fuelectenerg-6011	379	40	gate	gate	NOUN
fuelectenerg-6011	379	41	memory	memory	NOUN
fuelectenerg-6011	379	42	with	with	ADP
fuelectenerg-6011	379	43	excellent	excellent	ADJ
fuelectenerg-6011	379	44	retention	retention	NOUN
fuelectenerg-6011	379	45	characteristics	characteristic	NOUN
fuelectenerg-6011	379	46	”	"	PUNCT
fuelectenerg-6011	379	47	,	,	PUNCT
fuelectenerg-6011	379	48	advanced	advanced	ADJ
fuelectenerg-6011	379	49	electron	electron	NOUN
fuelectenerg-6011	379	50	.	.	PUNCT
fuelectenerg-6011	380	1	mater	mater	PROPN
fuelectenerg-6011	380	2	.	.	PUNCT
fuelectenerg-6011	380	3	,	,	PUNCT
fuelectenerg-6011	380	4	vol	vol	NOUN
fuelectenerg-6011	380	5	.	.	PROPN
fuelectenerg-6011	380	6	5	5	NUM
fuelectenerg-6011	380	7	,	,	PUNCT
fuelectenerg-6011	380	8	pp	pp	ADJ
fuelectenerg-6011	380	9	.	.	PUNCT
fuelectenerg-6011	381	1	1800726	1800726	NUM
fuelectenerg-6011	381	2	(	(	PUNCT
fuelectenerg-6011	381	3	1–7	1–7	NUM
fuelectenerg-6011	381	4	)	)	PUNCT
fuelectenerg-6011	381	5	,	,	PUNCT
fuelectenerg-6011	381	6	2019	2019	NUM
fuelectenerg-6011	381	7	.	.	PUNCT
