id	sid	tid	token	lemma	pos
fuelectenerg-671	1	1	instruction	instruction	NOUN
fuelectenerg-671	1	2	facta	facta	PROPN
fuelectenerg-671	1	3	universitatis	universitatis	PROPN
fuelectenerg-671	1	4	series	series	NOUN
fuelectenerg-671	1	5	:	:	PUNCT
fuelectenerg-671	1	6	electronics	electronic	NOUN
fuelectenerg-671	1	7	and	and	CCONJ
fuelectenerg-671	1	8	energetics	energetics	NOUN
fuelectenerg-671	1	9	vol	vol	NOUN
fuelectenerg-671	1	10	.	.	PUNCT
fuelectenerg-671	1	11	28	28	NUM
fuelectenerg-671	1	12	,	,	PUNCT
fuelectenerg-671	1	13	no	no	DET
fuelectenerg-671	1	14	3	3	NUM
fuelectenerg-671	1	15	,	,	PUNCT
fuelectenerg-671	1	16	september	september	PROPN
fuelectenerg-671	1	17	2015	2015	NUM
fuelectenerg-671	1	18	,	,	PUNCT
fuelectenerg-671	1	19	pp	pp	ADV
fuelectenerg-671	1	20	.	.	PUNCT
fuelectenerg-671	2	1	457	457	NUM
fuelectenerg-671	2	2	464	464	NUM
fuelectenerg-671	2	3	doi	doi	NOUN
fuelectenerg-671	2	4	:	:	PUNCT
fuelectenerg-671	2	5	10.2298	10.2298	NUM
fuelectenerg-671	2	6	/	/	SYM
fuelectenerg-671	2	7	fuee1503457c	fuee1503457c	PROPN
fuelectenerg-671	2	8	using	use	VERB
fuelectenerg-671	2	9	a	a	DET
fuelectenerg-671	2	10	two	two	NUM
fuelectenerg-671	2	11	-	-	PUNCT
fuelectenerg-671	2	12	contact	contact	NOUN
fuelectenerg-671	2	13	circular	circular	ADJ
fuelectenerg-671	2	14	test	test	NOUN
fuelectenerg-671	2	15	structure	structure	NOUN
fuelectenerg-671	2	16	to	to	PART
fuelectenerg-671	2	17	determine	determine	VERB
fuelectenerg-671	2	18	the	the	DET
fuelectenerg-671	2	19	specific	specific	ADJ
fuelectenerg-671	2	20	contact	contact	NOUN
fuelectenerg-671	2	21	resistivity	resistivity	NOUN
fuelectenerg-671	2	22	of	of	ADP
fuelectenerg-671	2	23	contacts	contact	NOUN
fuelectenerg-671	2	24	to	to	ADP
fuelectenerg-671	2	25	bulk	bulk	ADJ
fuelectenerg-671	2	26	semiconductors	semiconductor	NOUN
fuelectenerg-671	2	27			PUNCT
fuelectenerg-671	2	28	aaron	aaron	PROPN
fuelectenerg-671	2	29	m.	m.	PROPN
fuelectenerg-671	2	30	collins	collins	PROPN
fuelectenerg-671	2	31	,	,	PUNCT
fuelectenerg-671	2	32	yue	yue	PROPN
fuelectenerg-671	2	33	pan	pan	PROPN
fuelectenerg-671	2	34	,	,	PUNCT
fuelectenerg-671	2	35	anthony	anthony	PROPN
fuelectenerg-671	2	36	s.	s.	PROPN
fuelectenerg-671	2	37	holland	holland	PROPN
fuelectenerg-671	2	38	school	school	PROPN
fuelectenerg-671	2	39	of	of	ADP
fuelectenerg-671	2	40	science	science	NOUN
fuelectenerg-671	2	41	engineering	engineering	NOUN
fuelectenerg-671	2	42	and	and	CCONJ
fuelectenerg-671	2	43	health	health	NOUN
fuelectenerg-671	2	44	,	,	PUNCT
fuelectenerg-671	2	45	rmit	rmit	PROPN
fuelectenerg-671	2	46	university	university	PROPN
fuelectenerg-671	2	47	,	,	PUNCT
fuelectenerg-671	2	48	australia	australia	PROPN
fuelectenerg-671	2	49	abstract	abstract	NOUN
fuelectenerg-671	2	50	.	.	PUNCT
fuelectenerg-671	3	1	we	we	PRON
fuelectenerg-671	3	2	present	present	VERB
fuelectenerg-671	3	3	a	a	DET
fuelectenerg-671	3	4	numerical	numerical	ADJ
fuelectenerg-671	3	5	method	method	NOUN
fuelectenerg-671	3	6	to	to	PART
fuelectenerg-671	3	7	extract	extract	VERB
fuelectenerg-671	3	8	specific	specific	ADJ
fuelectenerg-671	3	9	contact	contact	NOUN
fuelectenerg-671	3	10	resistivity	resistivity	NOUN
fuelectenerg-671	3	11	(	(	PUNCT
fuelectenerg-671	3	12	scr	scr	NOUN
fuelectenerg-671	3	13	)	)	PUNCT
fuelectenerg-671	3	14	for	for	ADP
fuelectenerg-671	3	15	three	three	NUM
fuelectenerg-671	3	16	-	-	PUNCT
fuelectenerg-671	3	17	dimensional	dimensional	ADJ
fuelectenerg-671	3	18	(	(	PUNCT
fuelectenerg-671	3	19	3	3	NUM
fuelectenerg-671	3	20	-	-	SYM
fuelectenerg-671	3	21	d	d	NOUN
fuelectenerg-671	3	22	)	)	PUNCT
fuelectenerg-671	3	23	contact	contact	NOUN
fuelectenerg-671	3	24	structures	structure	NOUN
fuelectenerg-671	3	25	using	use	VERB
fuelectenerg-671	3	26	a	a	DET
fuelectenerg-671	3	27	two	two	NUM
fuelectenerg-671	3	28	-	-	PUNCT
fuelectenerg-671	3	29	electrode	electrode	NOUN
fuelectenerg-671	3	30	test	test	NOUN
fuelectenerg-671	3	31	structure	structure	NOUN
fuelectenerg-671	3	32	.	.	PUNCT
fuelectenerg-671	4	1	this	this	DET
fuelectenerg-671	4	2	method	method	NOUN
fuelectenerg-671	4	3	was	be	AUX
fuelectenerg-671	4	4	developed	develop	VERB
fuelectenerg-671	4	5	using	use	VERB
fuelectenerg-671	4	6	finite	finite	ADJ
fuelectenerg-671	4	7	element	element	NOUN
fuelectenerg-671	4	8	modeling	modeling	NOUN
fuelectenerg-671	4	9	(	(	PUNCT
fuelectenerg-671	4	10	fem	fem	NOUN
fuelectenerg-671	4	11	)	)	PUNCT
fuelectenerg-671	4	12	.	.	PUNCT
fuelectenerg-671	5	1	experimental	experimental	ADJ
fuelectenerg-671	5	2	measurements	measurement	NOUN
fuelectenerg-671	5	3	were	be	AUX
fuelectenerg-671	5	4	performed	perform	VERB
fuelectenerg-671	5	5	for	for	ADP
fuelectenerg-671	5	6	contacts	contact	NOUN
fuelectenerg-671	5	7	of	of	ADP
fuelectenerg-671	5	8	200	200	NUM
fuelectenerg-671	5	9	nm	nm	ADJ
fuelectenerg-671	5	10	nickel	nickel	NOUN
fuelectenerg-671	5	11	(	(	PUNCT
fuelectenerg-671	5	12	ni	ni	NOUN
fuelectenerg-671	5	13	)	)	PUNCT
fuelectenerg-671	5	14	to	to	ADP
fuelectenerg-671	5	15	p+-type	p+-type	NOUN
fuelectenerg-671	5	16	germanium	germanium	NOUN
fuelectenerg-671	5	17	(	(	PUNCT
fuelectenerg-671	5	18	ge	ge	PROPN
fuelectenerg-671	5	19	)	)	PUNCT
fuelectenerg-671	5	20	substrates	substrate	NOUN
fuelectenerg-671	5	21	and	and	CCONJ
fuelectenerg-671	5	22	200	200	NUM
fuelectenerg-671	5	23	nm	nm	NOUN
fuelectenerg-671	5	24	of	of	ADP
fuelectenerg-671	5	25	titanium	titanium	NOUN
fuelectenerg-671	5	26	(	(	PUNCT
fuelectenerg-671	5	27	ti	ti	NOUN
fuelectenerg-671	5	28	)	)	PUNCT
fuelectenerg-671	5	29	on	on	ADP
fuelectenerg-671	5	30	4h	4h	NUM
fuelectenerg-671	5	31	-	-	PUNCT
fuelectenerg-671	5	32	silicon	silicon	NOUN
fuelectenerg-671	5	33	carbide	carbide	NOUN
fuelectenerg-671	5	34	(	(	PUNCT
fuelectenerg-671	5	35	sic	sic	ADJ
fuelectenerg-671	5	36	)	)	PUNCT
fuelectenerg-671	5	37	.	.	PUNCT
fuelectenerg-671	6	1	the	the	DET
fuelectenerg-671	6	2	scr	scr	NOUN
fuelectenerg-671	6	3	obtained	obtain	VERB
fuelectenerg-671	6	4	was	be	AUX
fuelectenerg-671	6	5	(	(	PUNCT
fuelectenerg-671	6	6	2.3	2.3	NUM
fuelectenerg-671	6	7	-	-	SYM
fuelectenerg-671	6	8	27	27	NUM
fuelectenerg-671	6	9	)	)	PUNCT
fuelectenerg-671	6	10	×10	×10	NOUN
fuelectenerg-671	6	11	-	-	SYM
fuelectenerg-671	6	12	6	6	NUM
fuelectenerg-671	6	13	ω·cm2	ω·cm2	ADJ
fuelectenerg-671	6	14	for	for	ADP
fuelectenerg-671	6	15	the	the	DET
fuelectenerg-671	6	16	ni	ni	PROPN
fuelectenerg-671	6	17	-	-	PROPN
fuelectenerg-671	6	18	ge	ge	PROPN
fuelectenerg-671	6	19	contacts	contact	NOUN
fuelectenerg-671	6	20	and	and	CCONJ
fuelectenerg-671	6	21	(	(	PUNCT
fuelectenerg-671	6	22	1.3	1.3	NUM
fuelectenerg-671	6	23	-	-	SYM
fuelectenerg-671	6	24	2.4	2.4	NUM
fuelectenerg-671	6	25	)	)	PUNCT
fuelectenerg-671	6	26	×10	×10	NOUN
fuelectenerg-671	6	27	-	-	PUNCT
fuelectenerg-671	6	28	3	3	NUM
fuelectenerg-671	6	29	ω·cm2	ω·cm2	NOUN
fuelectenerg-671	6	30	for	for	ADP
fuelectenerg-671	6	31	the	the	DET
fuelectenerg-671	6	32	ti	ti	NOUN
fuelectenerg-671	6	33	-	-	NOUN
fuelectenerg-671	6	34	sic	sic	ADJ
fuelectenerg-671	6	35	.	.	PUNCT
fuelectenerg-671	7	1	key	key	ADJ
fuelectenerg-671	7	2	words	word	NOUN
fuelectenerg-671	7	3	:	:	PUNCT
fuelectenerg-671	7	4	specific	specific	ADJ
fuelectenerg-671	7	5	contact	contact	NOUN
fuelectenerg-671	7	6	resistivity	resistivity	NOUN
fuelectenerg-671	7	7	,	,	PUNCT
fuelectenerg-671	7	8	test	test	NOUN
fuelectenerg-671	7	9	structures	structure	NOUN
fuelectenerg-671	7	10	,	,	PUNCT
fuelectenerg-671	7	11	ohmic	ohmic	ADJ
fuelectenerg-671	7	12	contact	contact	NOUN
fuelectenerg-671	7	13	.	.	PUNCT
fuelectenerg-671	8	1	1	1	X
fuelectenerg-671	8	2	.	.	X
fuelectenerg-671	8	3	introduction	introduction	NOUN
fuelectenerg-671	8	4	specific	specific	ADJ
fuelectenerg-671	8	5	contact	contact	NOUN
fuelectenerg-671	8	6	resistivity	resistivity	NOUN
fuelectenerg-671	8	7	(	(	PUNCT
fuelectenerg-671	8	8	ρc	ρc	X
fuelectenerg-671	8	9	,	,	PUNCT
fuelectenerg-671	8	10	[	[	X
fuelectenerg-671	8	11	ω·cm	ω·cm	X
fuelectenerg-671	8	12	2	2	NUM
fuelectenerg-671	8	13	]	]	PUNCT
fuelectenerg-671	8	14	)	)	PUNCT
fuelectenerg-671	8	15	is	be	AUX
fuelectenerg-671	8	16	one	one	NUM
fuelectenerg-671	8	17	of	of	ADP
fuelectenerg-671	8	18	the	the	DET
fuelectenerg-671	8	19	most	most	ADV
fuelectenerg-671	8	20	important	important	ADJ
fuelectenerg-671	8	21	parameters	parameter	NOUN
fuelectenerg-671	8	22	in	in	ADP
fuelectenerg-671	8	23	studying	study	VERB
fuelectenerg-671	8	24	metal	metal	NOUN
fuelectenerg-671	8	25	-	-	PUNCT
fuelectenerg-671	8	26	semiconductor	semiconductor	NOUN
fuelectenerg-671	8	27	interfacial	interfacial	ADJ
fuelectenerg-671	8	28	properties	property	NOUN
fuelectenerg-671	8	29	.	.	PUNCT
fuelectenerg-671	9	1	this	this	DET
fuelectenerg-671	9	2	parameter	parameter	NOUN
fuelectenerg-671	9	3	is	be	AUX
fuelectenerg-671	9	4	useful	useful	ADJ
fuelectenerg-671	9	5	to	to	PART
fuelectenerg-671	9	6	determine	determine	VERB
fuelectenerg-671	9	7	the	the	DET
fuelectenerg-671	9	8	quality	quality	NOUN
fuelectenerg-671	9	9	of	of	ADP
fuelectenerg-671	9	10	a	a	DET
fuelectenerg-671	9	11	contact	contact	NOUN
fuelectenerg-671	9	12	between	between	ADP
fuelectenerg-671	9	13	two	two	NUM
fuelectenerg-671	9	14	materials	material	NOUN
fuelectenerg-671	9	15	,	,	PUNCT
fuelectenerg-671	9	16	due	due	ADP
fuelectenerg-671	9	17	to	to	ADP
fuelectenerg-671	9	18	specific	specific	ADJ
fuelectenerg-671	9	19	contact	contact	NOUN
fuelectenerg-671	9	20	resistance	resistance	NOUN
fuelectenerg-671	9	21	being	be	AUX
fuelectenerg-671	9	22	geometry	geometry	NOUN
fuelectenerg-671	9	23	independent	independent	ADJ
fuelectenerg-671	9	24	.	.	PUNCT
fuelectenerg-671	10	1	therefore	therefore	ADV
fuelectenerg-671	10	2	methods	method	NOUN
fuelectenerg-671	10	3	of	of	ADP
fuelectenerg-671	10	4	testing	test	VERB
fuelectenerg-671	10	5	this	this	DET
fuelectenerg-671	10	6	parameter	parameter	NOUN
fuelectenerg-671	10	7	can	can	AUX
fuelectenerg-671	10	8	be	be	AUX
fuelectenerg-671	10	9	seen	see	VERB
fuelectenerg-671	10	10	to	to	PART
fuelectenerg-671	10	11	be	be	AUX
fuelectenerg-671	10	12	of	of	ADP
fuelectenerg-671	10	13	great	great	ADJ
fuelectenerg-671	10	14	use	use	NOUN
fuelectenerg-671	10	15	to	to	ADP
fuelectenerg-671	10	16	reliability	reliability	NOUN
fuelectenerg-671	10	17	simulations	simulation	NOUN
fuelectenerg-671	10	18	.	.	PUNCT
fuelectenerg-671	11	1	in	in	ADP
fuelectenerg-671	11	2	measuring	measure	VERB
fuelectenerg-671	11	3	the	the	DET
fuelectenerg-671	11	4	specific	specific	ADJ
fuelectenerg-671	11	5	contact	contact	NOUN
fuelectenerg-671	11	6	resistivity	resistivity	NOUN
fuelectenerg-671	11	7	,	,	PUNCT
fuelectenerg-671	11	8	several	several	ADJ
fuelectenerg-671	11	9	test	test	NOUN
fuelectenerg-671	11	10	structures	structure	NOUN
fuelectenerg-671	11	11	and	and	CCONJ
fuelectenerg-671	11	12	methods	method	NOUN
fuelectenerg-671	11	13	have	have	AUX
fuelectenerg-671	11	14	been	be	AUX
fuelectenerg-671	11	15	reported	report	VERB
fuelectenerg-671	11	16	[	[	PUNCT
fuelectenerg-671	11	17	1	1	NUM
fuelectenerg-671	11	18	-	-	SYM
fuelectenerg-671	11	19	6	6	NUM
fuelectenerg-671	11	20	]	]	PUNCT
fuelectenerg-671	11	21	.	.	PUNCT
fuelectenerg-671	12	1	among	among	ADP
fuelectenerg-671	12	2	them	they	PRON
fuelectenerg-671	12	3	,	,	PUNCT
fuelectenerg-671	12	4	the	the	DET
fuelectenerg-671	12	5	transmission	transmission	NOUN
fuelectenerg-671	12	6	line	line	NOUN
fuelectenerg-671	12	7	model	model	NOUN
fuelectenerg-671	12	8	(	(	PUNCT
fuelectenerg-671	12	9	tlm	tlm	PROPN
fuelectenerg-671	12	10	)	)	PUNCT
fuelectenerg-671	12	11	and	and	CCONJ
fuelectenerg-671	12	12	circular	circular	ADJ
fuelectenerg-671	12	13	transmission	transmission	NOUN
fuelectenerg-671	12	14	line	line	NOUN
fuelectenerg-671	12	15	models	model	NOUN
fuelectenerg-671	12	16	(	(	PUNCT
fuelectenerg-671	12	17	ctlm	ctlm	NOUN
fuelectenerg-671	12	18	)	)	PUNCT
fuelectenerg-671	12	19	are	be	AUX
fuelectenerg-671	12	20	commonly	commonly	ADV
fuelectenerg-671	12	21	used	use	VERB
fuelectenerg-671	12	22	[	[	PUNCT
fuelectenerg-671	12	23	7	7	NUM
fuelectenerg-671	12	24	]	]	PUNCT
fuelectenerg-671	12	25	due	due	ADP
fuelectenerg-671	12	26	to	to	ADP
fuelectenerg-671	12	27	their	their	PRON
fuelectenerg-671	12	28	long	long	ADJ
fuelectenerg-671	12	29	standing	standing	NOUN
fuelectenerg-671	12	30	reliability	reliability	NOUN
fuelectenerg-671	12	31	in	in	ADP
fuelectenerg-671	12	32	testing	testing	NOUN
fuelectenerg-671	12	33	methods	method	NOUN
fuelectenerg-671	12	34	.	.	PUNCT
fuelectenerg-671	13	1	analysis	analysis	NOUN
fuelectenerg-671	13	2	using	use	VERB
fuelectenerg-671	13	3	the	the	DET
fuelectenerg-671	13	4	tlm	tlm	PROPN
fuelectenerg-671	13	5	and	and	CCONJ
fuelectenerg-671	13	6	ctlm	ctlm	NOUN
fuelectenerg-671	13	7	is	be	AUX
fuelectenerg-671	13	8	based	base	VERB
fuelectenerg-671	13	9	on	on	ADP
fuelectenerg-671	13	10	a	a	DET
fuelectenerg-671	13	11	two	two	NUM
fuelectenerg-671	13	12	-	-	PUNCT
fuelectenerg-671	13	13	dimensional	dimensional	ADJ
fuelectenerg-671	13	14	(	(	PUNCT
fuelectenerg-671	13	15	2	2	NUM
fuelectenerg-671	13	16	-	-	SYM
fuelectenerg-671	13	17	d	d	NOUN
fuelectenerg-671	13	18	)	)	PUNCT
fuelectenerg-671	13	19	model	model	NOUN
fuelectenerg-671	13	20	which	which	PRON
fuelectenerg-671	13	21	assumes	assume	VERB
fuelectenerg-671	13	22	no	no	DET
fuelectenerg-671	13	23	voltage	voltage	NOUN
fuelectenerg-671	13	24	drop	drop	NOUN
fuelectenerg-671	13	25	in	in	ADP
fuelectenerg-671	13	26	the	the	DET
fuelectenerg-671	13	27	semiconductor	semiconductor	NOUN
fuelectenerg-671	13	28	layer	layer	NOUN
fuelectenerg-671	13	29	in	in	ADP
fuelectenerg-671	13	30	the	the	DET
fuelectenerg-671	13	31	vertical	vertical	ADJ
fuelectenerg-671	13	32	direction	direction	NOUN
fuelectenerg-671	13	33	.	.	PUNCT
fuelectenerg-671	14	1	however	however	ADV
fuelectenerg-671	14	2	,	,	PUNCT
fuelectenerg-671	14	3	due	due	ADP
fuelectenerg-671	14	4	to	to	ADP
fuelectenerg-671	14	5	the	the	DET
fuelectenerg-671	14	6	reducing	reduce	VERB
fuelectenerg-671	14	7	size	size	NOUN
fuelectenerg-671	14	8	of	of	ADP
fuelectenerg-671	14	9	semiconductor	semiconductor	NOUN
fuelectenerg-671	14	10	devices	device	NOUN
fuelectenerg-671	14	11	and	and	CCONJ
fuelectenerg-671	14	12	decreased	decrease	VERB
fuelectenerg-671	14	13	ρc	ρc	PROPN
fuelectenerg-671	14	14	,	,	PUNCT
fuelectenerg-671	14	15	this	this	DET
fuelectenerg-671	14	16	vertical	vertical	ADJ
fuelectenerg-671	14	17	voltage	voltage	NOUN
fuelectenerg-671	14	18	drop	drop	NOUN
fuelectenerg-671	14	19	in	in	ADP
fuelectenerg-671	14	20	the	the	DET
fuelectenerg-671	14	21	semiconductor	semiconductor	NOUN
fuelectenerg-671	14	22	layer	layer	NOUN
fuelectenerg-671	14	23	could	could	AUX
fuelectenerg-671	14	24	lead	lead	VERB
fuelectenerg-671	14	25	to	to	ADP
fuelectenerg-671	14	26	errors	error	NOUN
fuelectenerg-671	14	27	in	in	ADP
fuelectenerg-671	14	28	derivation	derivation	NOUN
fuelectenerg-671	14	29	of	of	ADP
fuelectenerg-671	14	30	specific	specific	ADJ
fuelectenerg-671	14	31	contact	contact	NOUN
fuelectenerg-671	14	32	resistivity	resistivity	NOUN
fuelectenerg-671	14	33	using	use	VERB
fuelectenerg-671	14	34	either	either	CCONJ
fuelectenerg-671	14	35	tlm	tlm	PROPN
fuelectenerg-671	14	36	or	or	CCONJ
fuelectenerg-671	14	37	ctlm	ctlm	NOUN
fuelectenerg-671	14	38	.	.	PUNCT
fuelectenerg-671	15	1	furthermore	furthermore	ADV
fuelectenerg-671	15	2	,	,	PUNCT
fuelectenerg-671	15	3	the	the	DET
fuelectenerg-671	15	4	prevalence	prevalence	NOUN
fuelectenerg-671	15	5	of	of	ADP
fuelectenerg-671	15	6	mems	mem	NOUN
fuelectenerg-671	15	7	semiconductor	semiconductor	NOUN
fuelectenerg-671	15	8	devices	device	NOUN
fuelectenerg-671	15	9	suggests	suggest	VERB
fuelectenerg-671	15	10	the	the	DET
fuelectenerg-671	15	11	need	need	NOUN
fuelectenerg-671	15	12	for	for	ADP
fuelectenerg-671	15	13	a	a	DET
fuelectenerg-671	15	14	3	3	NUM
fuelectenerg-671	15	15	-	-	PUNCT
fuelectenerg-671	15	16	d	d	NOUN
fuelectenerg-671	15	17	test	test	NOUN
fuelectenerg-671	15	18	structure	structure	NOUN
fuelectenerg-671	15	19	for	for	ADP
fuelectenerg-671	15	20	determining	determine	VERB
fuelectenerg-671	15	21	ρc	ρc	PRON
fuelectenerg-671	15	22	of	of	ADP
fuelectenerg-671	15	23	contacts	contact	NOUN
fuelectenerg-671	15	24	to	to	ADP
fuelectenerg-671	15	25	such	such	ADJ
fuelectenerg-671	15	26	devices	device	NOUN
fuelectenerg-671	15	27	.	.	PUNCT
fuelectenerg-671	16	1	correction	correction	NOUN
fuelectenerg-671	16	2	factors	factor	NOUN
fuelectenerg-671	16	3	are	be	AUX
fuelectenerg-671	16	4	commonly	commonly	ADV
fuelectenerg-671	16	5	used	use	VERB
fuelectenerg-671	16	6	to	to	PART
fuelectenerg-671	16	7	increase	increase	VERB
fuelectenerg-671	16	8	the	the	DET
fuelectenerg-671	16	9	accuracy	accuracy	NOUN
fuelectenerg-671	16	10	of	of	ADP
fuelectenerg-671	16	11	derived	derive	VERB
fuelectenerg-671	16	12	specific	specific	ADJ
fuelectenerg-671	16	13	contact	contact	NOUN
fuelectenerg-671	16	14	resistivity	resistivity	NOUN
fuelectenerg-671	16	15	in	in	ADP
fuelectenerg-671	16	16	3	3	NUM
fuelectenerg-671	16	17	-	-	PUNCT
fuelectenerg-671	16	18	d	d	NOUN
fuelectenerg-671	16	19	circumstances	circumstance	NOUN
fuelectenerg-671	16	20	[	[	X
fuelectenerg-671	16	21	8	8	NUM
fuelectenerg-671	16	22	]	]	PUNCT
fuelectenerg-671	16	23	,	,	PUNCT
fuelectenerg-671	16	24	but	but	CCONJ
fuelectenerg-671	16	25	not	not	PART
fuelectenerg-671	16	26	in	in	ADP
fuelectenerg-671	16	27	the	the	DET
fuelectenerg-671	16	28	technique	technique	NOUN
fuelectenerg-671	16	29	used	use	VERB
fuelectenerg-671	16	30	in	in	ADP
fuelectenerg-671	16	31	this	this	DET
fuelectenerg-671	16	32	paper	paper	NOUN
fuelectenerg-671	16	33	.	.	PUNCT
fuelectenerg-671	17	1	in	in	ADP
fuelectenerg-671	17	2	this	this	DET
fuelectenerg-671	17	3	paper	paper	NOUN
fuelectenerg-671	17	4	,	,	PUNCT
fuelectenerg-671	17	5	we	we	PRON
fuelectenerg-671	17	6	present	present	VERB
fuelectenerg-671	17	7	a	a	DET
fuelectenerg-671	17	8	numerical	numerical	ADJ
fuelectenerg-671	17	9	method	method	NOUN
fuelectenerg-671	17	10	to	to	PART
fuelectenerg-671	17	11	extract	extract	VERB
fuelectenerg-671	17	12	specific	specific	ADJ
fuelectenerg-671	17	13	contact	contact	NOUN
fuelectenerg-671	17	14	resistivity	resistivity	NOUN
fuelectenerg-671	17	15	for	for	ADP
fuelectenerg-671	17	16	3	3	NUM
fuelectenerg-671	17	17	-	-	SYM
fuelectenerg-671	17	18	d	d	NOUN
fuelectenerg-671	17	19	contact	contact	NOUN
fuelectenerg-671	17	20	structures	structure	NOUN
fuelectenerg-671	17	21	using	use	VERB
fuelectenerg-671	17	22	a	a	DET
fuelectenerg-671	17	23	two	two	NUM
fuelectenerg-671	17	24	-	-	PUNCT
fuelectenerg-671	17	25	electrode	electrode	NOUN
fuelectenerg-671	17	26	circular	circular	ADJ
fuelectenerg-671	17	27	test	test	NOUN
fuelectenerg-671	17	28	structure	structure	NOUN
fuelectenerg-671	17	29	derived	derive	VERB
fuelectenerg-671	17	30	from	from	ADP
fuelectenerg-671	17	31	investigation	investigation	NOUN
fuelectenerg-671	17	32	of	of	ADP
fuelectenerg-671	17	33	the	the	DET
fuelectenerg-671	17	34	conventional	conventional	ADJ
fuelectenerg-671	17	35	three	three	NUM
fuelectenerg-671	17	36	-	-	PUNCT
fuelectenerg-671	17	37	electrode	electrode	NOUN
fuelectenerg-671	17	38	ctlm	ctlm	NOUN
fuelectenerg-671	18	1	[	[	X
fuelectenerg-671	18	2	9	9	NUM
fuelectenerg-671	18	3	]	]	PUNCT
fuelectenerg-671	18	4	.	.	PUNCT
fuelectenerg-671	19	1	the	the	DET
fuelectenerg-671	19	2	method	method	NOUN
fuelectenerg-671	19	3	was	be	AUX
fuelectenerg-671	19	4	developed	develop	VERB
fuelectenerg-671	19	5	using	use	VERB
fuelectenerg-671	19	6	finite	finite	NOUN
fuelectenerg-671	19	7	received	receive	VERB
fuelectenerg-671	19	8	december	december	PROPN
fuelectenerg-671	19	9	2	2	NUM
fuelectenerg-671	19	10	,	,	PUNCT
fuelectenerg-671	19	11	2014	2014	NUM
fuelectenerg-671	19	12	;	;	PUNCT
fuelectenerg-671	19	13	received	receive	VERB
fuelectenerg-671	19	14	in	in	ADP
fuelectenerg-671	19	15	revised	revise	VERB
fuelectenerg-671	19	16	form	form	NOUN
fuelectenerg-671	19	17	february	february	PROPN
fuelectenerg-671	19	18	10	10	NUM
fuelectenerg-671	19	19	,	,	PUNCT
fuelectenerg-671	19	20	2015	2015	NUM
fuelectenerg-671	19	21	corresponding	correspond	VERB
fuelectenerg-671	19	22	author	author	NOUN
fuelectenerg-671	19	23	:	:	PUNCT
fuelectenerg-671	19	24	yue	yue	PROPN
fuelectenerg-671	19	25	pan	pan	PROPN
fuelectenerg-671	19	26	school	school	PROPN
fuelectenerg-671	19	27	of	of	ADP
fuelectenerg-671	19	28	science	science	NOUN
fuelectenerg-671	19	29	engineering	engineering	NOUN
fuelectenerg-671	19	30	and	and	CCONJ
fuelectenerg-671	19	31	health	health	NOUN
fuelectenerg-671	19	32	,	,	PUNCT
fuelectenerg-671	19	33	rmit	rmit	PROPN
fuelectenerg-671	19	34	university	university	PROPN
fuelectenerg-671	19	35	,	,	PUNCT
fuelectenerg-671	19	36	australia	australia	PROPN
fuelectenerg-671	19	37	(	(	PUNCT
fuelectenerg-671	19	38	e	e	NOUN
fuelectenerg-671	19	39	-	-	NOUN
fuelectenerg-671	19	40	mail	mail	NOUN
fuelectenerg-671	19	41	:	:	PUNCT
fuelectenerg-671	19	42	s3265073@student.rmit.edu.au)	s3265073@student.rmit.edu.au)	VERB
fuelectenerg-671	19	43	458	458	NUM
fuelectenerg-671	19	44	a.	a.	NOUN
fuelectenerg-671	19	45	m.	m.	PROPN
fuelectenerg-671	19	46	collins	collins	PROPN
fuelectenerg-671	19	47	,	,	PUNCT
fuelectenerg-671	19	48	y.	y.	PROPN
fuelectenerg-671	19	49	pan	pan	PROPN
fuelectenerg-671	19	50	,	,	PUNCT
fuelectenerg-671	19	51	a.	a.	PROPN
fuelectenerg-671	19	52	s.	s.	PROPN
fuelectenerg-671	19	53	holland	holland	PROPN
fuelectenerg-671	19	54	element	element	PROPN
fuelectenerg-671	19	55	modeling	modeling	NOUN
fuelectenerg-671	19	56	(	(	PUNCT
fuelectenerg-671	19	57	fem	fem	NOUN
fuelectenerg-671	19	58	)	)	PUNCT
fuelectenerg-671	19	59	of	of	ADP
fuelectenerg-671	19	60	ohmic	ohmic	ADJ
fuelectenerg-671	19	61	contacts	contact	NOUN
fuelectenerg-671	19	62	between	between	ADP
fuelectenerg-671	19	63	a	a	DET
fuelectenerg-671	19	64	metal	metal	NOUN
fuelectenerg-671	19	65	layer	layer	NOUN
fuelectenerg-671	19	66	and	and	CCONJ
fuelectenerg-671	19	67	a	a	DET
fuelectenerg-671	19	68	semiconductor	semiconductor	NOUN
fuelectenerg-671	19	69	substrate	substrate	NOUN
fuelectenerg-671	19	70	and	and	CCONJ
fuelectenerg-671	19	71	the	the	DET
fuelectenerg-671	19	72	scaling	scale	VERB
fuelectenerg-671	19	73	behavior	behavior	NOUN
fuelectenerg-671	19	74	of	of	ADP
fuelectenerg-671	19	75	this	this	DET
fuelectenerg-671	19	76	method	method	NOUN
fuelectenerg-671	19	77	was	be	AUX
fuelectenerg-671	19	78	also	also	ADV
fuelectenerg-671	19	79	determined	determine	VERB
fuelectenerg-671	19	80	and	and	CCONJ
fuelectenerg-671	19	81	discussed	discuss	VERB
fuelectenerg-671	19	82	in	in	ADP
fuelectenerg-671	19	83	this	this	DET
fuelectenerg-671	19	84	paper	paper	NOUN
fuelectenerg-671	19	85	.	.	PUNCT
fuelectenerg-671	20	1	this	this	DET
fuelectenerg-671	20	2	method	method	NOUN
fuelectenerg-671	20	3	presents	present	VERB
fuelectenerg-671	20	4	its	its	PRON
fuelectenerg-671	20	5	most	most	ADV
fuelectenerg-671	20	6	useful	useful	ADJ
fuelectenerg-671	20	7	application	application	NOUN
fuelectenerg-671	20	8	in	in	ADP
fuelectenerg-671	20	9	areas	area	NOUN
fuelectenerg-671	20	10	where	where	SCONJ
fuelectenerg-671	20	11	the	the	DET
fuelectenerg-671	20	12	lateral	lateral	ADJ
fuelectenerg-671	20	13	dimensions	dimension	NOUN
fuelectenerg-671	20	14	are	be	AUX
fuelectenerg-671	20	15	far	far	ADV
fuelectenerg-671	20	16	greater	great	ADJ
fuelectenerg-671	20	17	than	than	ADP
fuelectenerg-671	20	18	the	the	DET
fuelectenerg-671	20	19	vertical	vertical	NOUN
fuelectenerg-671	20	20	.	.	PUNCT
fuelectenerg-671	21	1	experimental	experimental	ADJ
fuelectenerg-671	21	2	measurements	measurement	NOUN
fuelectenerg-671	21	3	using	use	VERB
fuelectenerg-671	21	4	the	the	DET
fuelectenerg-671	21	5	proposed	propose	VERB
fuelectenerg-671	21	6	test	test	NOUN
fuelectenerg-671	21	7	structure	structure	NOUN
fuelectenerg-671	21	8	were	be	AUX
fuelectenerg-671	21	9	performed	perform	VERB
fuelectenerg-671	21	10	for	for	ADP
fuelectenerg-671	21	11	contacts	contact	NOUN
fuelectenerg-671	21	12	of	of	ADP
fuelectenerg-671	21	13	200	200	NUM
fuelectenerg-671	21	14	nm	nm	NOUN
fuelectenerg-671	21	15	ni	ni	NOUN
fuelectenerg-671	21	16	to	to	ADP
fuelectenerg-671	21	17	p	p	NOUN
fuelectenerg-671	21	18	-	-	PUNCT
fuelectenerg-671	21	19	type	type	NOUN
fuelectenerg-671	21	20	ge	ge	PROPN
fuelectenerg-671	21	21	substrates	substrate	NOUN
fuelectenerg-671	21	22	and	and	CCONJ
fuelectenerg-671	21	23	contacts	contact	NOUN
fuelectenerg-671	21	24	for	for	ADP
fuelectenerg-671	21	25	200	200	NUM
fuelectenerg-671	21	26	nm	nm	ADJ
fuelectenerg-671	21	27	ti	ti	NOUN
fuelectenerg-671	21	28	to	to	ADP
fuelectenerg-671	21	29	4h	4h	NUM
fuelectenerg-671	21	30	-	-	PUNCT
fuelectenerg-671	21	31	sic	sic	ADJ
fuelectenerg-671	21	32	and	and	CCONJ
fuelectenerg-671	21	33	the	the	DET
fuelectenerg-671	21	34	specific	specific	ADJ
fuelectenerg-671	21	35	contact	contact	NOUN
fuelectenerg-671	21	36	resistivity	resistivity	NOUN
fuelectenerg-671	21	37	was	be	AUX
fuelectenerg-671	21	38	determined	determine	VERB
fuelectenerg-671	21	39	to	to	PART
fuelectenerg-671	21	40	be	be	AUX
fuelectenerg-671	21	41	(	(	PUNCT
fuelectenerg-671	21	42	2.3	2.3	NUM
fuelectenerg-671	21	43	-	-	SYM
fuelectenerg-671	21	44	27)×10	27)×10	NUM
fuelectenerg-671	21	45	-6	-6	NOUN
fuelectenerg-671	21	46	ω·cm	ω·cm	X
fuelectenerg-671	21	47	2	2	NUM
fuelectenerg-671	21	48	and	and	CCONJ
fuelectenerg-671	21	49	(	(	PUNCT
fuelectenerg-671	21	50	1.3	1.3	NUM
fuelectenerg-671	21	51	-	-	PUNCT
fuelectenerg-671	21	52	2.4)×10	2.4)×10	NUM
fuelectenerg-671	21	53	-3	-3	PUNCT
fuelectenerg-671	21	54	ω·cm	ω·cm	X
fuelectenerg-671	21	55	2	2	NUM
fuelectenerg-671	21	56	respectively	respectively	ADV
fuelectenerg-671	21	57	.	.	PUNCT
fuelectenerg-671	22	1	2	2	X
fuelectenerg-671	22	2	.	.	X
fuelectenerg-671	22	3	the	the	DET
fuelectenerg-671	22	4	structure	structure	NOUN
fuelectenerg-671	22	5	as	as	SCONJ
fuelectenerg-671	22	6	defined	define	VERB
fuelectenerg-671	22	7	by	by	ADP
fuelectenerg-671	22	8	berger	berger	PROPN
fuelectenerg-671	22	9	[	[	X
fuelectenerg-671	22	10	10	10	NUM
fuelectenerg-671	22	11	]	]	PUNCT
fuelectenerg-671	22	12	,	,	PUNCT
fuelectenerg-671	22	13	the	the	DET
fuelectenerg-671	22	14	parameter	parameter	PROPN
fuelectenerg-671	22	15	η	η	PROPN
fuelectenerg-671	22	16	is	be	AUX
fuelectenerg-671	22	17	used	use	VERB
fuelectenerg-671	22	18	to	to	PART
fuelectenerg-671	22	19	determine	determine	VERB
fuelectenerg-671	22	20	whether	whether	SCONJ
fuelectenerg-671	22	21	a	a	DET
fuelectenerg-671	22	22	metal	metal	NOUN
fuelectenerg-671	22	23	and	and	CCONJ
fuelectenerg-671	22	24	a	a	DET
fuelectenerg-671	22	25	semiconductor	semiconductor	NOUN
fuelectenerg-671	22	26	ohmic	ohmic	ADJ
fuelectenerg-671	22	27	contact	contact	NOUN
fuelectenerg-671	22	28	is	be	AUX
fuelectenerg-671	22	29	in	in	ADP
fuelectenerg-671	22	30	3	3	NUM
fuelectenerg-671	22	31	-	-	PUNCT
fuelectenerg-671	22	32	d	d	NOUN
fuelectenerg-671	22	33	circumstance	circumstance	NOUN
fuelectenerg-671	22	34	or	or	CCONJ
fuelectenerg-671	22	35	not	not	PART
fuelectenerg-671	22	36	.	.	PUNCT
fuelectenerg-671	23	1	in	in	ADP
fuelectenerg-671	23	2	(	(	PUNCT
fuelectenerg-671	23	3	1	1	NUM
fuelectenerg-671	23	4	)	)	PUNCT
fuelectenerg-671	23	5	,	,	PUNCT
fuelectenerg-671	23	6	when	when	SCONJ
fuelectenerg-671	23	7	η	η	PROPN
fuelectenerg-671	23	8	≤	≤	PROPN
fuelectenerg-671	23	9	1	1	NUM
fuelectenerg-671	23	10	,	,	PUNCT
fuelectenerg-671	23	11	we	we	PRON
fuelectenerg-671	23	12	have	have	VERB
fuelectenerg-671	23	13	a	a	DET
fuelectenerg-671	23	14	3	3	NUM
fuelectenerg-671	23	15	-	-	PUNCT
fuelectenerg-671	23	16	d	d	NOUN
fuelectenerg-671	23	17	contact	contact	NOUN
fuelectenerg-671	23	18	,	,	PUNCT
fuelectenerg-671	23	19	otherwise	otherwise	ADV
fuelectenerg-671	23	20	it	it	PRON
fuelectenerg-671	23	21	is	be	AUX
fuelectenerg-671	23	22	a	a	DET
fuelectenerg-671	23	23	2	2	NUM
fuelectenerg-671	23	24	-	-	PUNCT
fuelectenerg-671	23	25	d	d	NOUN
fuelectenerg-671	23	26	contact	contact	NOUN
fuelectenerg-671	23	27	.	.	PUNCT
fuelectenerg-671	24	1	note	note	VERB
fuelectenerg-671	24	2	that	that	SCONJ
fuelectenerg-671	24	3	ρb	ρb	PROPN
fuelectenerg-671	24	4	and	and	CCONJ
fuelectenerg-671	24	5	t	t	PROPN
fuelectenerg-671	24	6	are	be	AUX
fuelectenerg-671	24	7	the	the	DET
fuelectenerg-671	24	8	resistivity	resistivity	NOUN
fuelectenerg-671	24	9	and	and	CCONJ
fuelectenerg-671	24	10	the	the	DET
fuelectenerg-671	24	11	thickness	thickness	NOUN
fuelectenerg-671	24	12	of	of	ADP
fuelectenerg-671	24	13	the	the	DET
fuelectenerg-671	24	14	semiconductor	semiconductor	NOUN
fuelectenerg-671	24	15	layer	layer	NOUN
fuelectenerg-671	24	16	respectively	respectively	ADV
fuelectenerg-671	24	17	.	.	PUNCT
fuelectenerg-671	25	1	(	(	PUNCT
fuelectenerg-671	25	2	1	1	X
fuelectenerg-671	25	3	)	)	PUNCT
fuelectenerg-671	25	4	to	to	PART
fuelectenerg-671	25	5	create	create	VERB
fuelectenerg-671	25	6	a	a	DET
fuelectenerg-671	25	7	pure	pure	ADJ
fuelectenerg-671	25	8	3	3	NUM
fuelectenerg-671	25	9	-	-	PUNCT
fuelectenerg-671	25	10	d	d	NOUN
fuelectenerg-671	25	11	situation	situation	NOUN
fuelectenerg-671	25	12	,	,	PUNCT
fuelectenerg-671	25	13	the	the	DET
fuelectenerg-671	25	14	test	test	NOUN
fuelectenerg-671	25	15	structure	structure	NOUN
fuelectenerg-671	25	16	is	be	AUX
fuelectenerg-671	25	17	assumed	assume	VERB
fuelectenerg-671	25	18	to	to	PART
fuelectenerg-671	25	19	be	be	AUX
fuelectenerg-671	25	20	fabricated	fabricate	VERB
fuelectenerg-671	25	21	on	on	ADP
fuelectenerg-671	25	22	a	a	DET
fuelectenerg-671	25	23	semiconductor	semiconductor	NOUN
fuelectenerg-671	25	24	substrate	substrate	NOUN
fuelectenerg-671	25	25	which	which	PRON
fuelectenerg-671	25	26	has	have	VERB
fuelectenerg-671	25	27	a	a	DET
fuelectenerg-671	25	28	relatively	relatively	ADV
fuelectenerg-671	25	29	large	large	ADJ
fuelectenerg-671	25	30	thickness	thickness	NOUN
fuelectenerg-671	25	31	to	to	PART
fuelectenerg-671	25	32	make	make	VERB
fuelectenerg-671	25	33	sure	sure	ADJ
fuelectenerg-671	25	34	η	η	PROPN
fuelectenerg-671	25	35	≤	≤	ADJ
fuelectenerg-671	25	36	1	1	NUM
fuelectenerg-671	25	37	.	.	PUNCT
fuelectenerg-671	26	1	the	the	DET
fuelectenerg-671	26	2	test	test	NOUN
fuelectenerg-671	26	3	pattern	pattern	NOUN
fuelectenerg-671	26	4	for	for	ADP
fuelectenerg-671	26	5	determining	determine	VERB
fuelectenerg-671	26	6	ρc	ρc	VERB
fuelectenerg-671	26	7	in	in	ADP
fuelectenerg-671	26	8	such	such	DET
fuelectenerg-671	26	9	a	a	DET
fuelectenerg-671	26	10	3	3	NUM
fuelectenerg-671	26	11	-	-	PUNCT
fuelectenerg-671	26	12	d	d	NOUN
fuelectenerg-671	26	13	circumstance	circumstance	NOUN
fuelectenerg-671	26	14	is	be	AUX
fuelectenerg-671	26	15	shown	show	VERB
fuelectenerg-671	26	16	in	in	ADP
fuelectenerg-671	26	17	fig	fig	NOUN
fuelectenerg-671	26	18	.	.	PUNCT
fuelectenerg-671	27	1	1	1	NUM
fuelectenerg-671	28	1	and	and	CCONJ
fuelectenerg-671	28	2	consists	consist	VERB
fuelectenerg-671	28	3	of	of	ADP
fuelectenerg-671	28	4	a	a	DET
fuelectenerg-671	28	5	central	central	ADJ
fuelectenerg-671	28	6	dot	dot	NOUN
fuelectenerg-671	28	7	contact	contact	NOUN
fuelectenerg-671	28	8	and	and	CCONJ
fuelectenerg-671	28	9	a	a	DET
fuelectenerg-671	28	10	ring	ring	NOUN
fuelectenerg-671	28	11	contact	contact	NOUN
fuelectenerg-671	28	12	.	.	PUNCT
fuelectenerg-671	29	1	the	the	DET
fuelectenerg-671	29	2	radius	radius	NOUN
fuelectenerg-671	29	3	of	of	ADP
fuelectenerg-671	29	4	the	the	DET
fuelectenerg-671	29	5	central	central	ADJ
fuelectenerg-671	29	6	dot	dot	NOUN
fuelectenerg-671	29	7	is	be	AUX
fuelectenerg-671	29	8	r0	r0	NOUN
fuelectenerg-671	29	9	and	and	CCONJ
fuelectenerg-671	29	10	the	the	DET
fuelectenerg-671	29	11	inner	inner	ADJ
fuelectenerg-671	29	12	and	and	CCONJ
fuelectenerg-671	29	13	outer	outer	ADJ
fuelectenerg-671	29	14	radii	radius	NOUN
fuelectenerg-671	29	15	of	of	ADP
fuelectenerg-671	29	16	the	the	DET
fuelectenerg-671	29	17	outer	outer	ADJ
fuelectenerg-671	29	18	electrode	electrode	NOUN
fuelectenerg-671	29	19	are	be	AUX
fuelectenerg-671	29	20	r1	r1	NOUN
fuelectenerg-671	29	21	and	and	CCONJ
fuelectenerg-671	29	22	r2	r2	PROPN
fuelectenerg-671	29	23	respectively	respectively	ADV
fuelectenerg-671	29	24	.	.	PUNCT
fuelectenerg-671	30	1	mesa	mesa	PROPN
fuelectenerg-671	30	2	isolation	isolation	NOUN
fuelectenerg-671	30	3	is	be	AUX
fuelectenerg-671	30	4	not	not	PART
fuelectenerg-671	30	5	needed	need	VERB
fuelectenerg-671	30	6	,	,	PUNCT
fuelectenerg-671	30	7	as	as	SCONJ
fuelectenerg-671	30	8	is	be	AUX
fuelectenerg-671	30	9	the	the	DET
fuelectenerg-671	30	10	case	case	NOUN
fuelectenerg-671	30	11	for	for	ADP
fuelectenerg-671	30	12	all	all	DET
fuelectenerg-671	30	13	ctlm	ctlm	ADJ
fuelectenerg-671	30	14	type	type	NOUN
fuelectenerg-671	30	15	test	test	NOUN
fuelectenerg-671	30	16	structures	structure	NOUN
fuelectenerg-671	30	17	.	.	PUNCT
fuelectenerg-671	31	1	in	in	ADP
fuelectenerg-671	31	2	this	this	DET
fuelectenerg-671	31	3	paper	paper	NOUN
fuelectenerg-671	31	4	,	,	PUNCT
fuelectenerg-671	31	5	r0	r0	NOUN
fuelectenerg-671	31	6	,	,	PUNCT
fuelectenerg-671	31	7	r1	r1	NOUN
fuelectenerg-671	31	8	,	,	PUNCT
fuelectenerg-671	31	9	r2	r2	PROPN
fuelectenerg-671	31	10	,	,	PUNCT
fuelectenerg-671	31	11	ρb	ρb	PRON
fuelectenerg-671	31	12	and	and	CCONJ
fuelectenerg-671	31	13	ρc	ρc	PROPN
fuelectenerg-671	31	14	are	be	AUX
fuelectenerg-671	31	15	all	all	DET
fuelectenerg-671	31	16	the	the	DET
fuelectenerg-671	31	17	information	information	NOUN
fuelectenerg-671	31	18	which	which	PRON
fuelectenerg-671	31	19	determine	determine	VERB
fuelectenerg-671	31	20	the	the	DET
fuelectenerg-671	31	21	total	total	ADJ
fuelectenerg-671	31	22	resistance	resistance	NOUN
fuelectenerg-671	31	23	rt	rt	PROPN
fuelectenerg-671	31	24	that	that	PRON
fuelectenerg-671	31	25	is	be	AUX
fuelectenerg-671	31	26	measured	measure	VERB
fuelectenerg-671	31	27	between	between	ADP
fuelectenerg-671	31	28	the	the	DET
fuelectenerg-671	31	29	two	two	NUM
fuelectenerg-671	31	30	electrodes	electrode	NOUN
fuelectenerg-671	31	31	.	.	PUNCT
fuelectenerg-671	32	1	it	it	PRON
fuelectenerg-671	32	2	can	can	AUX
fuelectenerg-671	32	3	be	be	AUX
fuelectenerg-671	32	4	written	write	VERB
fuelectenerg-671	32	5	in	in	ADP
fuelectenerg-671	32	6	the	the	DET
fuelectenerg-671	32	7	following	follow	VERB
fuelectenerg-671	32	8	form	form	NOUN
fuelectenerg-671	32	9	which	which	PRON
fuelectenerg-671	32	10	is	be	AUX
fuelectenerg-671	32	11	useful	useful	ADJ
fuelectenerg-671	32	12	in	in	ADP
fuelectenerg-671	32	13	the	the	DET
fuelectenerg-671	32	14	study	study	NOUN
fuelectenerg-671	32	15	of	of	ADP
fuelectenerg-671	32	16	the	the	DET
fuelectenerg-671	32	17	scaling	scale	VERB
fuelectenerg-671	32	18	behavior	behavior	NOUN
fuelectenerg-671	32	19	of	of	ADP
fuelectenerg-671	32	20	this	this	DET
fuelectenerg-671	32	21	method	method	NOUN
fuelectenerg-671	32	22	(	(	PUNCT
fuelectenerg-671	32	23	discuss	discuss	VERB
fuelectenerg-671	32	24	later	later	ADV
fuelectenerg-671	32	25	)	)	PUNCT
fuelectenerg-671	32	26	.	.	PUNCT
fuelectenerg-671	33	1	{	{	PUNCT
fuelectenerg-671	33	2	}	}	PUNCT
fuelectenerg-671	33	3	(	(	PUNCT
fuelectenerg-671	33	4	2	2	NUM
fuelectenerg-671	33	5	)	)	PUNCT
fuelectenerg-671	33	6	by	by	ADP
fuelectenerg-671	33	7	measuring	measure	VERB
fuelectenerg-671	33	8	rt	rt	PROPN
fuelectenerg-671	33	9	,	,	PUNCT
fuelectenerg-671	33	10	ρc	ρc	VERB
fuelectenerg-671	33	11	can	can	AUX
fuelectenerg-671	33	12	be	be	AUX
fuelectenerg-671	33	13	found	find	VERB
fuelectenerg-671	33	14	with	with	ADP
fuelectenerg-671	33	15	the	the	DET
fuelectenerg-671	33	16	resistivity	resistivity	NOUN
fuelectenerg-671	33	17	of	of	ADP
fuelectenerg-671	33	18	the	the	DET
fuelectenerg-671	33	19	semiconductor	semiconductor	NOUN
fuelectenerg-671	33	20	layer	layer	NOUN
fuelectenerg-671	33	21	ρb	ρb	X
fuelectenerg-671	33	22	and	and	CCONJ
fuelectenerg-671	33	23	the	the	DET
fuelectenerg-671	33	24	geometry	geometry	NOUN
fuelectenerg-671	33	25	sizes	size	NOUN
fuelectenerg-671	33	26	known	know	VERB
fuelectenerg-671	33	27	.	.	PUNCT
fuelectenerg-671	34	1	fig	fig	NOUN
fuelectenerg-671	34	2	.	.	PUNCT
fuelectenerg-671	35	1	1	1	NUM
fuelectenerg-671	35	2	isotropic	isotropic	ADJ
fuelectenerg-671	35	3	view	view	NOUN
fuelectenerg-671	35	4	of	of	ADP
fuelectenerg-671	35	5	schematic	schematic	ADJ
fuelectenerg-671	35	6	of	of	ADP
fuelectenerg-671	35	7	the	the	DET
fuelectenerg-671	35	8	proposed	propose	VERB
fuelectenerg-671	35	9	3	3	NUM
fuelectenerg-671	35	10	-	-	SYM
fuelectenerg-671	35	11	d	d	ADJ
fuelectenerg-671	35	12	two	two	NUM
fuelectenerg-671	35	13	-	-	PUNCT
fuelectenerg-671	35	14	contact	contact	NOUN
fuelectenerg-671	35	15	circular	circular	ADJ
fuelectenerg-671	35	16	test	test	NOUN
fuelectenerg-671	35	17	structure	structure	NOUN
fuelectenerg-671	35	18	.	.	PUNCT
fuelectenerg-671	36	1	using	use	VERB
fuelectenerg-671	36	2	a	a	DET
fuelectenerg-671	36	3	two	two	NUM
fuelectenerg-671	36	4	-	-	PUNCT
fuelectenerg-671	36	5	contact	contact	NOUN
fuelectenerg-671	36	6	circular	circular	ADJ
fuelectenerg-671	36	7	test	test	NOUN
fuelectenerg-671	36	8	structure	structure	NOUN
fuelectenerg-671	36	9	to	to	PART
fuelectenerg-671	36	10	determine	determine	VERB
fuelectenerg-671	36	11	the	the	DET
fuelectenerg-671	36	12	specific	specific	ADJ
fuelectenerg-671	36	13	contact	contact	NOUN
fuelectenerg-671	36	14	resistivity	resistivity	NOUN
fuelectenerg-671	36	15	...	...	PUNCT
fuelectenerg-671	36	16	459	459	NUM
fuelectenerg-671	36	17	3	3	X
fuelectenerg-671	36	18	.	.	PUNCT
fuelectenerg-671	37	1	the	the	DET
fuelectenerg-671	37	2	method	method	NOUN
fuelectenerg-671	37	3	the	the	DET
fuelectenerg-671	37	4	analytical	analytical	ADJ
fuelectenerg-671	37	5	solutions	solution	NOUN
fuelectenerg-671	37	6	to	to	ADP
fuelectenerg-671	37	7	the	the	DET
fuelectenerg-671	37	8	current	current	ADJ
fuelectenerg-671	37	9	-	-	PUNCT
fuelectenerg-671	37	10	voltage	voltage	NOUN
fuelectenerg-671	37	11	relationship	relationship	NOUN
fuelectenerg-671	37	12	of	of	ADP
fuelectenerg-671	37	13	the	the	DET
fuelectenerg-671	37	14	proposed	propose	VERB
fuelectenerg-671	37	15	test	test	NOUN
fuelectenerg-671	37	16	structure	structure	NOUN
fuelectenerg-671	37	17	were	be	AUX
fuelectenerg-671	37	18	deemed	deem	VERB
fuelectenerg-671	37	19	to	to	PART
fuelectenerg-671	37	20	be	be	AUX
fuelectenerg-671	37	21	too	too	ADV
fuelectenerg-671	37	22	difficult	difficult	ADJ
fuelectenerg-671	37	23	or	or	CCONJ
fuelectenerg-671	37	24	impossible	impossible	ADJ
fuelectenerg-671	37	25	to	to	PART
fuelectenerg-671	37	26	obtain	obtain	VERB
fuelectenerg-671	37	27	.	.	PUNCT
fuelectenerg-671	38	1	therefore	therefore	ADV
fuelectenerg-671	38	2	,	,	PUNCT
fuelectenerg-671	38	3	we	we	PRON
fuelectenerg-671	38	4	present	present	VERB
fuelectenerg-671	38	5	a	a	DET
fuelectenerg-671	38	6	numerical	numerical	ADJ
fuelectenerg-671	38	7	method	method	NOUN
fuelectenerg-671	38	8	to	to	PART
fuelectenerg-671	38	9	determine	determine	VERB
fuelectenerg-671	38	10	ρc	ρc	NOUN
fuelectenerg-671	38	11	which	which	PRON
fuelectenerg-671	38	12	is	be	AUX
fuelectenerg-671	38	13	developed	develop	VERB
fuelectenerg-671	38	14	using	use	VERB
fuelectenerg-671	38	15	finite	finite	ADJ
fuelectenerg-671	38	16	element	element	NOUN
fuelectenerg-671	38	17	modeling	modeling	NOUN
fuelectenerg-671	38	18	(	(	PUNCT
fuelectenerg-671	38	19	fem	fem	NOUN
fuelectenerg-671	38	20	)	)	PUNCT
fuelectenerg-671	38	21	of	of	ADP
fuelectenerg-671	38	22	ohmic	ohmic	ADJ
fuelectenerg-671	38	23	contacts	contact	NOUN
fuelectenerg-671	38	24	between	between	ADP
fuelectenerg-671	38	25	a	a	DET
fuelectenerg-671	38	26	metal	metal	NOUN
fuelectenerg-671	38	27	layer	layer	NOUN
fuelectenerg-671	38	28	and	and	CCONJ
fuelectenerg-671	38	29	a	a	DET
fuelectenerg-671	38	30	semiconductor	semiconductor	NOUN
fuelectenerg-671	38	31	substrate	substrate	NOUN
fuelectenerg-671	38	32	[	[	X
fuelectenerg-671	38	33	11	11	NUM
fuelectenerg-671	38	34	]	]	PUNCT
fuelectenerg-671	38	35	.	.	PUNCT
fuelectenerg-671	39	1	a.	a.	PROPN
fuelectenerg-671	39	2	finite	finite	PROPN
fuelectenerg-671	39	3	element	element	PROPN
fuelectenerg-671	39	4	modeling	model	VERB
fuelectenerg-671	39	5	fem	fem	NOUN
fuelectenerg-671	39	6	can	can	AUX
fuelectenerg-671	39	7	be	be	AUX
fuelectenerg-671	39	8	used	use	VERB
fuelectenerg-671	39	9	to	to	PART
fuelectenerg-671	39	10	accurately	accurately	ADV
fuelectenerg-671	39	11	model	model	VERB
fuelectenerg-671	39	12	the	the	DET
fuelectenerg-671	39	13	electrical	electrical	ADJ
fuelectenerg-671	39	14	behavior	behavior	NOUN
fuelectenerg-671	39	15	of	of	ADP
fuelectenerg-671	39	16	ohmic	ohmic	ADJ
fuelectenerg-671	39	17	contacts	contact	NOUN
fuelectenerg-671	39	18	between	between	ADP
fuelectenerg-671	39	19	a	a	DET
fuelectenerg-671	39	20	metal	metal	NOUN
fuelectenerg-671	39	21	and	and	CCONJ
fuelectenerg-671	39	22	a	a	DET
fuelectenerg-671	39	23	semiconductor	semiconductor	NOUN
fuelectenerg-671	39	24	.	.	PUNCT
fuelectenerg-671	40	1	creating	create	VERB
fuelectenerg-671	40	2	a	a	DET
fuelectenerg-671	40	3	model	model	NOUN
fuelectenerg-671	40	4	requires	require	VERB
fuelectenerg-671	40	5	the	the	DET
fuelectenerg-671	40	6	following	follow	VERB
fuelectenerg-671	40	7	information	information	NOUN
fuelectenerg-671	40	8	:	:	PUNCT
fuelectenerg-671	40	9	(	(	PUNCT
fuelectenerg-671	40	10	i	i	NOUN
fuelectenerg-671	40	11	)	)	PUNCT
fuelectenerg-671	40	12	test	test	NOUN
fuelectenerg-671	40	13	structure	structure	NOUN
fuelectenerg-671	40	14	geometry	geometry	NOUN
fuelectenerg-671	40	15	,	,	PUNCT
fuelectenerg-671	40	16	(	(	PUNCT
fuelectenerg-671	40	17	ii	ii	NOUN
fuelectenerg-671	40	18	)	)	PUNCT
fuelectenerg-671	40	19	conductivity	conductivity	NOUN
fuelectenerg-671	40	20	of	of	ADP
fuelectenerg-671	40	21	each	each	DET
fuelectenerg-671	40	22	layer	layer	NOUN
fuelectenerg-671	40	23	in	in	ADP
fuelectenerg-671	40	24	the	the	DET
fuelectenerg-671	40	25	structure	structure	NOUN
fuelectenerg-671	40	26	and	and	CCONJ
fuelectenerg-671	40	27	(	(	PUNCT
fuelectenerg-671	40	28	iii	iii	NOUN
fuelectenerg-671	40	29	)	)	PUNCT
fuelectenerg-671	40	30	specific	specific	ADJ
fuelectenerg-671	40	31	contact	contact	NOUN
fuelectenerg-671	40	32	resistivity	resistivity	NOUN
fuelectenerg-671	40	33	ρc	ρc	VERB
fuelectenerg-671	40	34	of	of	ADP
fuelectenerg-671	40	35	each	each	DET
fuelectenerg-671	40	36	interface	interface	NOUN
fuelectenerg-671	40	37	in	in	ADP
fuelectenerg-671	40	38	the	the	DET
fuelectenerg-671	40	39	structure	structure	NOUN
fuelectenerg-671	40	40	.	.	PUNCT
fuelectenerg-671	41	1	msc	msc	PROPN
fuelectenerg-671	41	2	nastran	nastran	PROPN
fuelectenerg-671	41	3	is	be	AUX
fuelectenerg-671	41	4	a	a	DET
fuelectenerg-671	41	5	finite	finite	ADJ
fuelectenerg-671	41	6	element	element	NOUN
fuelectenerg-671	41	7	program	program	NOUN
fuelectenerg-671	41	8	developed	develop	VERB
fuelectenerg-671	41	9	by	by	ADP
fuelectenerg-671	41	10	nasa	nasa	PROPN
fuelectenerg-671	41	11	for	for	ADP
fuelectenerg-671	41	12	electrical	electrical	ADJ
fuelectenerg-671	41	13	analysis	analysis	NOUN
fuelectenerg-671	41	14	while	while	SCONJ
fuelectenerg-671	41	15	msc	msc	PROPN
fuelectenerg-671	41	16	patran	patran	PROPN
fuelectenerg-671	41	17	is	be	AUX
fuelectenerg-671	41	18	used	use	VERB
fuelectenerg-671	41	19	for	for	ADP
fuelectenerg-671	41	20	creating	create	VERB
fuelectenerg-671	41	21	models	model	NOUN
fuelectenerg-671	41	22	and	and	CCONJ
fuelectenerg-671	41	23	meshing	meshing	NOUN
fuelectenerg-671	41	24	.	.	PUNCT
fuelectenerg-671	42	1	fig	fig	NOUN
fuelectenerg-671	42	2	.	.	PUNCT
fuelectenerg-671	43	1	2	2	NUM
fuelectenerg-671	43	2	shows	show	VERB
fuelectenerg-671	43	3	a	a	DET
fuelectenerg-671	43	4	section	section	NOUN
fuelectenerg-671	43	5	of	of	ADP
fuelectenerg-671	43	6	the	the	DET
fuelectenerg-671	43	7	fem	fem	NOUN
fuelectenerg-671	43	8	model	model	NOUN
fuelectenerg-671	43	9	used	use	VERB
fuelectenerg-671	43	10	to	to	PART
fuelectenerg-671	43	11	develop	develop	VERB
fuelectenerg-671	43	12	solutions	solution	NOUN
fuelectenerg-671	43	13	for	for	ADP
fuelectenerg-671	43	14	the	the	DET
fuelectenerg-671	43	15	3	3	NUM
fuelectenerg-671	43	16	-	-	PUNCT
fuelectenerg-671	43	17	d	d	ADJ
fuelectenerg-671	43	18	ohmic	ohmic	ADJ
fuelectenerg-671	43	19	contact	contact	NOUN
fuelectenerg-671	43	20	test	test	NOUN
fuelectenerg-671	43	21	structure	structure	NOUN
fuelectenerg-671	43	22	.	.	PUNCT
fuelectenerg-671	44	1	it	it	PRON
fuelectenerg-671	44	2	consists	consist	VERB
fuelectenerg-671	44	3	of	of	ADP
fuelectenerg-671	44	4	three	three	NUM
fuelectenerg-671	44	5	layers	layer	NOUN
fuelectenerg-671	44	6	which	which	PRON
fuelectenerg-671	44	7	are	be	AUX
fuelectenerg-671	44	8	metal	metal	NOUN
fuelectenerg-671	44	9	layer	layer	NOUN
fuelectenerg-671	44	10	on	on	ADP
fuelectenerg-671	44	11	the	the	DET
fuelectenerg-671	44	12	top	top	ADJ
fuelectenerg-671	44	13	,	,	PUNCT
fuelectenerg-671	44	14	bulk	bulk	ADJ
fuelectenerg-671	44	15	semiconductor	semiconductor	NOUN
fuelectenerg-671	44	16	on	on	ADP
fuelectenerg-671	44	17	the	the	DET
fuelectenerg-671	44	18	bottom	bottom	NOUN
fuelectenerg-671	44	19	and	and	CCONJ
fuelectenerg-671	44	20	the	the	DET
fuelectenerg-671	44	21	very	very	ADV
fuelectenerg-671	44	22	thin	thin	ADJ
fuelectenerg-671	44	23	interfacial	interfacial	ADJ
fuelectenerg-671	44	24	layer	layer	NOUN
fuelectenerg-671	44	25	between	between	ADP
fuelectenerg-671	44	26	them	they	PRON
fuelectenerg-671	44	27	.	.	PUNCT
fuelectenerg-671	45	1	only	only	ADV
fuelectenerg-671	45	2	a	a	DET
fuelectenerg-671	45	3	45	45	NUM
fuelectenerg-671	45	4	◦	◦	NOUN
fuelectenerg-671	45	5	sector	sector	NOUN
fuelectenerg-671	45	6	is	be	AUX
fuelectenerg-671	45	7	modeled	model	VERB
fuelectenerg-671	45	8	to	to	PART
fuelectenerg-671	45	9	reduce	reduce	VERB
fuelectenerg-671	45	10	the	the	DET
fuelectenerg-671	45	11	time	time	NOUN
fuelectenerg-671	45	12	taken	take	VERB
fuelectenerg-671	45	13	for	for	ADP
fuelectenerg-671	45	14	analysis	analysis	NOUN
fuelectenerg-671	45	15	to	to	PART
fuelectenerg-671	45	16	run	run	VERB
fuelectenerg-671	45	17	.	.	PUNCT
fuelectenerg-671	46	1	the	the	DET
fuelectenerg-671	46	2	current	current	NOUN
fuelectenerg-671	46	3	is	be	AUX
fuelectenerg-671	46	4	injected	inject	VERB
fuelectenerg-671	46	5	at	at	ADP
fuelectenerg-671	46	6	fig	fig	NOUN
fuelectenerg-671	46	7	.	.	PUNCT
fuelectenerg-671	47	1	2	2	NUM
fuelectenerg-671	47	2	equipotentials	equipotential	NOUN
fuelectenerg-671	47	3	(	(	PUNCT
fuelectenerg-671	47	4	in	in	ADP
fuelectenerg-671	47	5	millivolts	millivolt	NOUN
fuelectenerg-671	47	6	)	)	PUNCT
fuelectenerg-671	47	7	in	in	ADP
fuelectenerg-671	47	8	the	the	DET
fuelectenerg-671	47	9	semiconductor	semiconductor	NOUN
fuelectenerg-671	47	10	layer	layer	NOUN
fuelectenerg-671	47	11	in	in	ADP
fuelectenerg-671	47	12	a	a	DET
fuelectenerg-671	47	13	3	3	NUM
fuelectenerg-671	47	14	-	-	PUNCT
fuelectenerg-671	47	15	d	d	NOUN
fuelectenerg-671	47	16	situation	situation	NOUN
fuelectenerg-671	47	17	for	for	ADP
fuelectenerg-671	47	18	the	the	DET
fuelectenerg-671	47	19	finite	finite	ADJ
fuelectenerg-671	47	20	-	-	ADJ
fuelectenerg-671	47	21	element	element	ADJ
fuelectenerg-671	47	22	modeling	modeling	NOUN
fuelectenerg-671	47	23	example	example	NOUN
fuelectenerg-671	47	24	where	where	SCONJ
fuelectenerg-671	47	25	r0	r0	NOUN
fuelectenerg-671	47	26	=	=	NOUN
fuelectenerg-671	47	27	3	3	NUM
fuelectenerg-671	47	28	μm	μm	NOUN
fuelectenerg-671	47	29	,	,	PUNCT
fuelectenerg-671	47	30	r1	r1	NOUN
fuelectenerg-671	47	31	=	=	SYM
fuelectenerg-671	47	32	5	5	NUM
fuelectenerg-671	47	33	μm	μm	NOUN
fuelectenerg-671	47	34	,	,	PUNCT
fuelectenerg-671	47	35	and	and	CCONJ
fuelectenerg-671	47	36	r2	r2	PROPN
fuelectenerg-671	47	37	=	=	SYM
fuelectenerg-671	47	38	9	9	NUM
fuelectenerg-671	47	39	μm	μm	NOUN
fuelectenerg-671	47	40	.	.	PUNCT
fuelectenerg-671	48	1	(	(	PUNCT
fuelectenerg-671	48	2	a	a	DET
fuelectenerg-671	48	3	45	45	NUM
fuelectenerg-671	48	4	°	°	ADJ
fuelectenerg-671	48	5	sector	sector	NOUN
fuelectenerg-671	48	6	of	of	ADP
fuelectenerg-671	48	7	the	the	DET
fuelectenerg-671	48	8	test	test	NOUN
fuelectenerg-671	48	9	structure	structure	NOUN
fuelectenerg-671	48	10	is	be	AUX
fuelectenerg-671	48	11	presented	present	VERB
fuelectenerg-671	48	12	)	)	PUNCT
fuelectenerg-671	48	13	.	.	PUNCT
fuelectenerg-671	49	1	460	460	NUM
fuelectenerg-671	49	2	a.	a.	NOUN
fuelectenerg-671	49	3	m.	m.	PROPN
fuelectenerg-671	49	4	collins	collins	PROPN
fuelectenerg-671	49	5	,	,	PUNCT
fuelectenerg-671	49	6	y.	y.	PROPN
fuelectenerg-671	49	7	pan	pan	PROPN
fuelectenerg-671	49	8	,	,	PUNCT
fuelectenerg-671	49	9	a.	a.	PROPN
fuelectenerg-671	49	10	s.	s.	PROPN
fuelectenerg-671	49	11	holland	holland	PROPN
fuelectenerg-671	49	12	the	the	DET
fuelectenerg-671	49	13	center	center	PROPN
fuelectenerg-671	49	14	electrode	electrode	NOUN
fuelectenerg-671	49	15	and	and	CCONJ
fuelectenerg-671	49	16	the	the	DET
fuelectenerg-671	49	17	equipotential	equipotential	NOUN
fuelectenerg-671	49	18	of	of	ADP
fuelectenerg-671	49	19	the	the	DET
fuelectenerg-671	49	20	outer	outer	ADJ
fuelectenerg-671	49	21	electrode	electrode	NOUN
fuelectenerg-671	49	22	is	be	AUX
fuelectenerg-671	49	23	set	set	VERB
fuelectenerg-671	49	24	to	to	ADP
fuelectenerg-671	49	25	zero	zero	NUM
fuelectenerg-671	49	26	.	.	PUNCT
fuelectenerg-671	50	1	the	the	DET
fuelectenerg-671	50	2	voltage	voltage	NOUN
fuelectenerg-671	50	3	contours	contours	NOUN
fuelectenerg-671	50	4	in	in	ADP
fuelectenerg-671	50	5	fig	fig	NOUN
fuelectenerg-671	50	6	.	.	PUNCT
fuelectenerg-671	51	1	2	2	NUM
fuelectenerg-671	51	2	shows	show	VERB
fuelectenerg-671	51	3	that	that	SCONJ
fuelectenerg-671	51	4	when	when	SCONJ
fuelectenerg-671	51	5	the	the	DET
fuelectenerg-671	51	6	thickness	thickness	NOUN
fuelectenerg-671	51	7	of	of	ADP
fuelectenerg-671	51	8	the	the	DET
fuelectenerg-671	51	9	semiconductor	semiconductor	NOUN
fuelectenerg-671	51	10	layer	layer	NOUN
fuelectenerg-671	51	11	t	t	PROPN
fuelectenerg-671	51	12	is	be	AUX
fuelectenerg-671	51	13	beyond	beyond	ADP
fuelectenerg-671	51	14	a	a	DET
fuelectenerg-671	51	15	certain	certain	ADJ
fuelectenerg-671	51	16	value	value	NOUN
fuelectenerg-671	51	17	t	t	NOUN
fuelectenerg-671	51	18	’	'	PUNCT
fuelectenerg-671	51	19	,	,	PUNCT
fuelectenerg-671	51	20	little	little	ADJ
fuelectenerg-671	51	21	current	current	NOUN
fuelectenerg-671	51	22	goes	go	VERB
fuelectenerg-671	51	23	through	through	ADP
fuelectenerg-671	51	24	the	the	DET
fuelectenerg-671	51	25	bottom	bottom	NOUN
fuelectenerg-671	51	26	of	of	ADP
fuelectenerg-671	51	27	the	the	DET
fuelectenerg-671	51	28	semiconductor	semiconductor	NOUN
fuelectenerg-671	51	29	substrate	substrate	NOUN
fuelectenerg-671	51	30	.	.	PUNCT
fuelectenerg-671	52	1	what	what	PRON
fuelectenerg-671	52	2	is	be	AUX
fuelectenerg-671	52	3	mean	mean	ADJ
fuelectenerg-671	52	4	by	by	ADP
fuelectenerg-671	52	5	this	this	PRON
fuelectenerg-671	52	6	is	be	AUX
fuelectenerg-671	52	7	that	that	SCONJ
fuelectenerg-671	52	8	when	when	SCONJ
fuelectenerg-671	52	9	metal	metal	NOUN
fuelectenerg-671	52	10	contacts	contact	NOUN
fuelectenerg-671	52	11	to	to	ADP
fuelectenerg-671	52	12	the	the	DET
fuelectenerg-671	52	13	substrate	substrate	NOUN
fuelectenerg-671	52	14	directly	directly	ADV
fuelectenerg-671	52	15	,	,	PUNCT
fuelectenerg-671	52	16	the	the	DET
fuelectenerg-671	52	17	thickness	thickness	NOUN
fuelectenerg-671	52	18	of	of	ADP
fuelectenerg-671	52	19	the	the	DET
fuelectenerg-671	52	20	semiconductor	semiconductor	NOUN
fuelectenerg-671	52	21	layer	layer	NOUN
fuelectenerg-671	52	22	t	t	PROPN
fuelectenerg-671	52	23	can	can	AUX
fuelectenerg-671	52	24	be	be	AUX
fuelectenerg-671	52	25	considered	consider	VERB
fuelectenerg-671	52	26	as	as	ADP
fuelectenerg-671	52	27	infinite	infinite	ADJ
fuelectenerg-671	52	28	beyond	beyond	ADP
fuelectenerg-671	52	29	this	this	DET
fuelectenerg-671	52	30	t	t	NOUN
fuelectenerg-671	52	31	’	'	PUNCT
fuelectenerg-671	52	32	(	(	PUNCT
fuelectenerg-671	52	33	relatively	relatively	ADV
fuelectenerg-671	52	34	small	small	ADJ
fuelectenerg-671	52	35	compare	compare	NOUN
fuelectenerg-671	52	36	to	to	ADP
fuelectenerg-671	52	37	typical	typical	ADJ
fuelectenerg-671	52	38	substrate	substrate	NOUN
fuelectenerg-671	52	39	thickness	thickness	NOUN
fuelectenerg-671	52	40	)	)	PUNCT
fuelectenerg-671	52	41	.	.	PUNCT
fuelectenerg-671	53	1	a	a	DET
fuelectenerg-671	53	2	number	number	NOUN
fuelectenerg-671	53	3	of	of	ADP
fuelectenerg-671	53	4	models	model	NOUN
fuelectenerg-671	53	5	are	be	AUX
fuelectenerg-671	53	6	analyzed	analyze	VERB
fuelectenerg-671	53	7	using	use	VERB
fuelectenerg-671	53	8	fem	fem	NOUN
fuelectenerg-671	53	9	with	with	ADP
fuelectenerg-671	53	10	ρb	ρb	PRON
fuelectenerg-671	53	11	and	and	CCONJ
fuelectenerg-671	53	12	ρc	ρc	AUX
fuelectenerg-671	53	13	varying	vary	VERB
fuelectenerg-671	53	14	from	from	ADP
fuelectenerg-671	53	15	0.0001	0.0001	NUM
fuelectenerg-671	53	16	ω·cm	ω·cm	NUM
fuelectenerg-671	53	17	to	to	ADP
fuelectenerg-671	53	18	0.001	0.001	NUM
fuelectenerg-671	53	19	ω·cm	ω·cm	NUM
fuelectenerg-671	53	20	and	and	CCONJ
fuelectenerg-671	53	21	1×10	1×10	NUM
fuelectenerg-671	53	22	-9	-9	INTJ
fuelectenerg-671	53	23	ω·cm	ω·cm	PROPN
fuelectenerg-671	53	24	2	2	NUM
fuelectenerg-671	53	25	to	to	ADP
fuelectenerg-671	53	26	1×10	1×10	NUM
fuelectenerg-671	53	27	-4	-4	SYM
fuelectenerg-671	53	28	ω·cm	ω·cm	PROPN
fuelectenerg-671	53	29	2	2	NUM
fuelectenerg-671	53	30	respectively	respectively	ADV
fuelectenerg-671	53	31	.	.	PUNCT
fuelectenerg-671	54	1	the	the	DET
fuelectenerg-671	54	2	geometry	geometry	NOUN
fuelectenerg-671	54	3	size	size	NOUN
fuelectenerg-671	54	4	is	be	AUX
fuelectenerg-671	54	5	fixed	fix	VERB
fuelectenerg-671	54	6	and	and	CCONJ
fuelectenerg-671	54	7	the	the	DET
fuelectenerg-671	54	8	thickness	thickness	NOUN
fuelectenerg-671	54	9	of	of	ADP
fuelectenerg-671	54	10	the	the	DET
fuelectenerg-671	54	11	semiconductor	semiconductor	NOUN
fuelectenerg-671	54	12	layer	layer	NOUN
fuelectenerg-671	54	13	is	be	AUX
fuelectenerg-671	54	14	set	set	VERB
fuelectenerg-671	54	15	to	to	PART
fuelectenerg-671	54	16	be	be	AUX
fuelectenerg-671	54	17	large	large	ADJ
fuelectenerg-671	54	18	enough	enough	ADV
fuelectenerg-671	54	19	to	to	PART
fuelectenerg-671	54	20	make	make	VERB
fuelectenerg-671	54	21	sure	sure	ADJ
fuelectenerg-671	54	22	the	the	DET
fuelectenerg-671	54	23	model	model	NOUN
fuelectenerg-671	54	24	is	be	AUX
fuelectenerg-671	54	25	3	3	NUM
fuelectenerg-671	54	26	-	-	SYM
fuelectenerg-671	54	27	d	d	NOUN
fuelectenerg-671	54	28	and	and	CCONJ
fuelectenerg-671	54	29	little	little	ADJ
fuelectenerg-671	54	30	current	current	NOUN
fuelectenerg-671	54	31	goes	go	VERB
fuelectenerg-671	54	32	through	through	ADP
fuelectenerg-671	54	33	the	the	DET
fuelectenerg-671	54	34	bottom	bottom	NOUN
fuelectenerg-671	54	35	of	of	ADP
fuelectenerg-671	54	36	the	the	DET
fuelectenerg-671	54	37	substrate	substrate	NOUN
fuelectenerg-671	54	38	.	.	PUNCT
fuelectenerg-671	55	1	by	by	ADP
fuelectenerg-671	55	2	doing	do	VERB
fuelectenerg-671	55	3	this	this	PRON
fuelectenerg-671	55	4	,	,	PUNCT
fuelectenerg-671	55	5	we	we	PRON
fuelectenerg-671	55	6	can	can	AUX
fuelectenerg-671	55	7	get	get	VERB
fuelectenerg-671	55	8	a	a	DET
fuelectenerg-671	55	9	constant	constant	ADJ
fuelectenerg-671	55	10	rt	rt	NOUN
fuelectenerg-671	55	11	with	with	ADP
fuelectenerg-671	55	12	different	different	ADJ
fuelectenerg-671	55	13	combinations	combination	NOUN
fuelectenerg-671	55	14	of	of	ADP
fuelectenerg-671	55	15	ρb	ρb	PRON
fuelectenerg-671	55	16	and	and	CCONJ
fuelectenerg-671	55	17	ρc	ρc	VERB
fuelectenerg-671	55	18	.	.	PUNCT
fuelectenerg-671	55	19	plotting	plot	VERB
fuelectenerg-671	55	20	rt	rt	PROPN
fuelectenerg-671	55	21	as	as	ADP
fuelectenerg-671	55	22	a	a	DET
fuelectenerg-671	55	23	function	function	NOUN
fuelectenerg-671	55	24	of	of	ADP
fuelectenerg-671	55	25	ρc	ρc	VERB
fuelectenerg-671	55	26	with	with	ADP
fuelectenerg-671	55	27	variable	variable	ADJ
fuelectenerg-671	55	28	ρb	ρb	NOUN
fuelectenerg-671	55	29	,	,	PUNCT
fuelectenerg-671	55	30	we	we	PRON
fuelectenerg-671	55	31	can	can	AUX
fuelectenerg-671	55	32	get	get	VERB
fuelectenerg-671	55	33	fig	fig	NOUN
fuelectenerg-671	55	34	.	.	PUNCT
fuelectenerg-671	56	1	3	3	X
fuelectenerg-671	56	2	.	.	X
fuelectenerg-671	56	3	from	from	ADP
fuelectenerg-671	56	4	fig	fig	NOUN
fuelectenerg-671	56	5	.	.	PUNCT
fuelectenerg-671	57	1	3	3	NUM
fuelectenerg-671	57	2	,	,	PUNCT
fuelectenerg-671	57	3	we	we	PRON
fuelectenerg-671	57	4	can	can	AUX
fuelectenerg-671	57	5	pick	pick	VERB
fuelectenerg-671	57	6	up	up	ADP
fuelectenerg-671	57	7	the	the	DET
fuelectenerg-671	57	8	right	right	ADJ
fuelectenerg-671	57	9	curve	curve	NOUN
fuelectenerg-671	57	10	with	with	ADP
fuelectenerg-671	57	11	known	know	VERB
fuelectenerg-671	57	12	semiconductor	semiconductor	NOUN
fuelectenerg-671	57	13	resistivity	resistivity	NOUN
fuelectenerg-671	57	14	ρb	ρb	NOUN
fuelectenerg-671	57	15	and	and	CCONJ
fuelectenerg-671	57	16	find	find	VERB
fuelectenerg-671	57	17	out	out	ADP
fuelectenerg-671	57	18	the	the	DET
fuelectenerg-671	57	19	value	value	NOUN
fuelectenerg-671	57	20	of	of	ADP
fuelectenerg-671	57	21	ρc	ρc	NOUN
fuelectenerg-671	57	22	using	use	VERB
fuelectenerg-671	57	23	the	the	DET
fuelectenerg-671	57	24	experimentally	experimentally	ADV
fuelectenerg-671	57	25	determined	determine	VERB
fuelectenerg-671	57	26	total	total	ADJ
fuelectenerg-671	57	27	resistance	resistance	NOUN
fuelectenerg-671	57	28	rt	rt	PROPN
fuelectenerg-671	57	29	.	.	PROPN
fuelectenerg-671	57	30	fig	fig	PROPN
fuelectenerg-671	57	31	.	.	PUNCT
fuelectenerg-671	58	1	3	3	NUM
fuelectenerg-671	58	2	fem	fem	NOUN
fuelectenerg-671	58	3	analysis	analysis	NOUN
fuelectenerg-671	58	4	results	result	NOUN
fuelectenerg-671	58	5	for	for	ADP
fuelectenerg-671	58	6	total	total	ADJ
fuelectenerg-671	58	7	resistance	resistance	NOUN
fuelectenerg-671	58	8	rt	rt	PROPN
fuelectenerg-671	58	9	between	between	ADP
fuelectenerg-671	58	10	the	the	DET
fuelectenerg-671	58	11	two	two	NUM
fuelectenerg-671	58	12	electrodes	electrode	NOUN
fuelectenerg-671	58	13	as	as	ADP
fuelectenerg-671	58	14	a	a	DET
fuelectenerg-671	58	15	function	function	NOUN
fuelectenerg-671	58	16	of	of	ADP
fuelectenerg-671	58	17	ρc	ρc	VERB
fuelectenerg-671	58	18	with	with	ADP
fuelectenerg-671	58	19	ρb	ρb	NUM
fuelectenerg-671	58	20	varying	vary	VERB
fuelectenerg-671	58	21	from	from	ADP
fuelectenerg-671	58	22	0.0001	0.0001	NUM
fuelectenerg-671	58	23	ω·cm	ω·cm	NUM
fuelectenerg-671	58	24	0.001	0.001	NUM
fuelectenerg-671	58	25	ω·cm	ω·cm	PROPN
fuelectenerg-671	58	26	.	.	PUNCT
fuelectenerg-671	58	27	geometry	geometry	NOUN
fuelectenerg-671	58	28	is	be	AUX
fuelectenerg-671	58	29	fixed	fix	VERB
fuelectenerg-671	58	30	.	.	PUNCT
fuelectenerg-671	59	1	r0	r0	NOUN
fuelectenerg-671	59	2	=	=	NOUN
fuelectenerg-671	59	3	3	3	NUM
fuelectenerg-671	59	4	μm	μm	NOUN
fuelectenerg-671	59	5	,	,	PUNCT
fuelectenerg-671	59	6	r1	r1	NOUN
fuelectenerg-671	59	7	=	=	SYM
fuelectenerg-671	59	8	5	5	NUM
fuelectenerg-671	59	9	μm	μm	NOUN
fuelectenerg-671	59	10	,	,	PUNCT
fuelectenerg-671	59	11	and	and	CCONJ
fuelectenerg-671	59	12	r2	r2	PROPN
fuelectenerg-671	59	13	=	=	SYM
fuelectenerg-671	59	14	9	9	NUM
fuelectenerg-671	59	15	μm	μm	NOUN
fuelectenerg-671	59	16	.	.	PUNCT
fuelectenerg-671	60	1	b.	b.	PROPN
fuelectenerg-671	60	2	scaling	scale	VERB
fuelectenerg-671	60	3	behavior	behavior	NOUN
fuelectenerg-671	60	4	the	the	DET
fuelectenerg-671	60	5	scaling	scale	VERB
fuelectenerg-671	60	6	behavior	behavior	NOUN
fuelectenerg-671	60	7	of	of	ADP
fuelectenerg-671	60	8	this	this	DET
fuelectenerg-671	60	9	method	method	NOUN
fuelectenerg-671	60	10	is	be	AUX
fuelectenerg-671	60	11	shown	show	VERB
fuelectenerg-671	60	12	in	in	ADP
fuelectenerg-671	60	13	(	(	PUNCT
fuelectenerg-671	60	14	3	3	NUM
fuelectenerg-671	60	15	)	)	PUNCT
fuelectenerg-671	60	16	{	{	PUNCT
fuelectenerg-671	60	17	}	}	PUNCT
fuelectenerg-671	60	18	{	{	PUNCT
fuelectenerg-671	60	19	}	}	PUNCT
fuelectenerg-671	60	20	(	(	PUNCT
fuelectenerg-671	60	21	3	3	X
fuelectenerg-671	60	22	)	)	PUNCT
fuelectenerg-671	60	23	using	use	VERB
fuelectenerg-671	60	24	(	(	PUNCT
fuelectenerg-671	60	25	3	3	NUM
fuelectenerg-671	60	26	)	)	PUNCT
fuelectenerg-671	60	27	,	,	PUNCT
fuelectenerg-671	60	28	the	the	DET
fuelectenerg-671	60	29	plots	plot	NOUN
fuelectenerg-671	60	30	in	in	ADP
fuelectenerg-671	60	31	fig	fig	NOUN
fuelectenerg-671	60	32	.	.	PUNCT
fuelectenerg-671	61	1	3	3	NUM
fuelectenerg-671	61	2	will	will	AUX
fuelectenerg-671	61	3	be	be	AUX
fuelectenerg-671	61	4	the	the	DET
fuelectenerg-671	61	5	same	same	ADJ
fuelectenerg-671	61	6	with	with	ADP
fuelectenerg-671	61	7	ρc	ρc	PROPN
fuelectenerg-671	61	8	,	,	PUNCT
fuelectenerg-671	61	9	rt	rt	PROPN
fuelectenerg-671	61	10	and	and	CCONJ
fuelectenerg-671	61	11	ρb	ρb	PROPN
fuelectenerg-671	61	12	scaled	scale	VERB
fuelectenerg-671	61	13	by	by	ADP
fuelectenerg-671	61	14	factors	factor	NOUN
fuelectenerg-671	61	15	of	of	ADP
fuelectenerg-671	61	16	m	m	PROPN
fuelectenerg-671	61	17	2	2	NUM
fuelectenerg-671	61	18	n	n	CCONJ
fuelectenerg-671	61	19	,	,	PUNCT
fuelectenerg-671	61	20	n	n	PROPN
fuelectenerg-671	61	21	and	and	CCONJ
fuelectenerg-671	61	22	mn	mn	PROPN
fuelectenerg-671	61	23	respectively	respectively	ADV
fuelectenerg-671	61	24	.	.	PUNCT
fuelectenerg-671	62	1	thus	thus	ADV
fuelectenerg-671	62	2	,	,	PUNCT
fuelectenerg-671	62	3	the	the	DET
fuelectenerg-671	62	4	structure	structure	NOUN
fuelectenerg-671	62	5	is	be	AUX
fuelectenerg-671	62	6	universal	universal	ADJ
fuelectenerg-671	62	7	and	and	CCONJ
fuelectenerg-671	62	8	applicable	applicable	ADJ
fuelectenerg-671	62	9	for	for	ADP
fuelectenerg-671	62	10	ohmic	ohmic	ADJ
fuelectenerg-671	62	11	contacts	contact	NOUN
fuelectenerg-671	62	12	where	where	SCONJ
fuelectenerg-671	62	13	the	the	DET
fuelectenerg-671	62	14	resistive	resistive	ADJ
fuelectenerg-671	62	15	effects	effect	NOUN
fuelectenerg-671	62	16	of	of	ADP
fuelectenerg-671	62	17	the	the	DET
fuelectenerg-671	62	18	semiconductor	semiconductor	NOUN
fuelectenerg-671	62	19	and	and	CCONJ
fuelectenerg-671	62	20	the	the	DET
fuelectenerg-671	62	21	contact	contact	NOUN
fuelectenerg-671	62	22	can	can	AUX
fuelectenerg-671	62	23	be	be	AUX
fuelectenerg-671	62	24	described	describe	VERB
fuelectenerg-671	62	25	by	by	ADP
fuelectenerg-671	62	26	ρb	ρb	PRON
fuelectenerg-671	62	27	and	and	CCONJ
fuelectenerg-671	62	28	the	the	DET
fuelectenerg-671	62	29	geometry	geometry	NOUN
fuelectenerg-671	62	30	of	of	ADP
fuelectenerg-671	62	31	the	the	DET
fuelectenerg-671	62	32	electrodes	electrode	NOUN
fuelectenerg-671	62	33	.	.	PUNCT
fuelectenerg-671	63	1	for	for	ADP
fuelectenerg-671	63	2	example	example	NOUN
fuelectenerg-671	63	3	,	,	PUNCT
fuelectenerg-671	63	4	when	when	SCONJ
fuelectenerg-671	63	5	m	m	VERB
fuelectenerg-671	63	6	=	=	SYM
fuelectenerg-671	63	7	1	1	NUM
fuelectenerg-671	63	8	and	and	CCONJ
fuelectenerg-671	63	9	n	n	NOUN
fuelectenerg-671	63	10	=	=	NUM
fuelectenerg-671	63	11	10	10	NUM
fuelectenerg-671	63	12	,	,	PUNCT
fuelectenerg-671	63	13	we	we	PRON
fuelectenerg-671	63	14	get	get	VERB
fuelectenerg-671	63	15	fig	fig	NOUN
fuelectenerg-671	63	16	.	.	PUNCT
fuelectenerg-671	64	1	4	4	NUM
fuelectenerg-671	64	2	which	which	PRON
fuelectenerg-671	64	3	has	have	VERB
fuelectenerg-671	64	4	the	the	DET
fuelectenerg-671	64	5	same	same	ADJ
fuelectenerg-671	64	6	shape	shape	NOUN
fuelectenerg-671	64	7	of	of	ADP
fuelectenerg-671	64	8	plots	plot	NOUN
fuelectenerg-671	64	9	in	in	ADP
fuelectenerg-671	64	10	fig	fig	NOUN
fuelectenerg-671	64	11	.	.	PUNCT
fuelectenerg-671	65	1	3	3	NUM
fuelectenerg-671	66	1	but	but	CCONJ
fuelectenerg-671	66	2	for	for	ADP
fuelectenerg-671	66	3	a	a	DET
fuelectenerg-671	66	4	new	new	ADJ
fuelectenerg-671	66	5	set	set	NOUN
fuelectenerg-671	66	6	of	of	ADP
fuelectenerg-671	66	7	ρb	ρb	NUM
fuelectenerg-671	66	8	.	.	PUNCT
fuelectenerg-671	67	1	using	use	VERB
fuelectenerg-671	67	2	a	a	DET
fuelectenerg-671	67	3	two	two	NUM
fuelectenerg-671	67	4	-	-	PUNCT
fuelectenerg-671	67	5	contact	contact	NOUN
fuelectenerg-671	67	6	circular	circular	ADJ
fuelectenerg-671	67	7	test	test	NOUN
fuelectenerg-671	67	8	structure	structure	NOUN
fuelectenerg-671	67	9	to	to	PART
fuelectenerg-671	67	10	determine	determine	VERB
fuelectenerg-671	67	11	the	the	DET
fuelectenerg-671	67	12	specific	specific	ADJ
fuelectenerg-671	67	13	contact	contact	NOUN
fuelectenerg-671	67	14	resistivity	resistivity	NOUN
fuelectenerg-671	67	15	...	...	PUNCT
fuelectenerg-671	67	16	461	461	NUM
fuelectenerg-671	67	17	fig	fig	NOUN
fuelectenerg-671	67	18	.	.	PUNCT
fuelectenerg-671	68	1	4	4	NUM
fuelectenerg-671	68	2	fem	fem	NOUN
fuelectenerg-671	68	3	analysis	analysis	NOUN
fuelectenerg-671	68	4	results	result	NOUN
fuelectenerg-671	68	5	for	for	ADP
fuelectenerg-671	68	6	total	total	ADJ
fuelectenerg-671	68	7	resistance	resistance	NOUN
fuelectenerg-671	68	8	rt	rt	PROPN
fuelectenerg-671	68	9	between	between	ADP
fuelectenerg-671	68	10	the	the	DET
fuelectenerg-671	68	11	two	two	NUM
fuelectenerg-671	68	12	electrodes	electrode	NOUN
fuelectenerg-671	68	13	as	as	ADP
fuelectenerg-671	68	14	a	a	DET
fuelectenerg-671	68	15	function	function	NOUN
fuelectenerg-671	68	16	of	of	ADP
fuelectenerg-671	68	17	ρc	ρc	VERB
fuelectenerg-671	68	18	with	with	ADP
fuelectenerg-671	68	19	ρb	ρb	NUM
fuelectenerg-671	68	20	varying	vary	VERB
fuelectenerg-671	68	21	from	from	ADP
fuelectenerg-671	68	22	0.001	0.001	NUM
fuelectenerg-671	68	23	ω·cm	ω·cm	NUM
fuelectenerg-671	68	24	0.01	0.01	NUM
fuelectenerg-671	68	25	ω·cm	ω·cm	PROPN
fuelectenerg-671	68	26	.	.	PUNCT
fuelectenerg-671	68	27	geometry	geometry	NOUN
fuelectenerg-671	68	28	is	be	AUX
fuelectenerg-671	68	29	fixed	fix	VERB
fuelectenerg-671	68	30	.	.	PUNCT
fuelectenerg-671	69	1	r0	r0	NOUN
fuelectenerg-671	69	2	=	=	NOUN
fuelectenerg-671	69	3	3	3	NUM
fuelectenerg-671	69	4	μm	μm	NOUN
fuelectenerg-671	69	5	,	,	PUNCT
fuelectenerg-671	69	6	r1	r1	NOUN
fuelectenerg-671	69	7	=	=	SYM
fuelectenerg-671	69	8	5	5	NUM
fuelectenerg-671	69	9	μm	μm	NOUN
fuelectenerg-671	69	10	,	,	PUNCT
fuelectenerg-671	69	11	and	and	CCONJ
fuelectenerg-671	69	12	r2	r2	PROPN
fuelectenerg-671	69	13	=	=	SYM
fuelectenerg-671	69	14	9	9	NUM
fuelectenerg-671	69	15	μm	μm	NOUN
fuelectenerg-671	69	16	.	.	PUNCT
fuelectenerg-671	70	1	note	note	VERB
fuelectenerg-671	70	2	that	that	SCONJ
fuelectenerg-671	70	3	this	this	DET
fuelectenerg-671	70	4	figure	figure	NOUN
fuelectenerg-671	70	5	can	can	AUX
fuelectenerg-671	70	6	be	be	AUX
fuelectenerg-671	70	7	scaled	scale	VERB
fuelectenerg-671	70	8	using	use	VERB
fuelectenerg-671	70	9	(	(	PUNCT
fuelectenerg-671	70	10	3	3	NUM
fuelectenerg-671	70	11	)	)	PUNCT
fuelectenerg-671	70	12	.	.	PUNCT
fuelectenerg-671	71	1	4	4	X
fuelectenerg-671	71	2	.	.	X
fuelectenerg-671	71	3	experimental	experimental	ADJ
fuelectenerg-671	71	4	and	and	CCONJ
fuelectenerg-671	71	5	results	result	VERB
fuelectenerg-671	71	6	experimental	experimental	ADJ
fuelectenerg-671	71	7	measurements	measurement	NOUN
fuelectenerg-671	71	8	using	use	VERB
fuelectenerg-671	71	9	the	the	DET
fuelectenerg-671	71	10	proposed	propose	VERB
fuelectenerg-671	71	11	test	test	NOUN
fuelectenerg-671	71	12	structure	structure	NOUN
fuelectenerg-671	71	13	were	be	AUX
fuelectenerg-671	71	14	performed	perform	VERB
fuelectenerg-671	71	15	for	for	ADP
fuelectenerg-671	71	16	contacts	contact	NOUN
fuelectenerg-671	71	17	of	of	ADP
fuelectenerg-671	71	18	200	200	NUM
fuelectenerg-671	71	19	nm	nm	NOUN
fuelectenerg-671	71	20	ni	ni	NOUN
fuelectenerg-671	71	21	to	to	ADP
fuelectenerg-671	71	22	ge	ge	PROPN
fuelectenerg-671	71	23	substrates	substrate	NOUN
fuelectenerg-671	71	24	.	.	PUNCT
fuelectenerg-671	72	1	a	a	DET
fuelectenerg-671	72	2	number	number	NOUN
fuelectenerg-671	72	3	of	of	ADP
fuelectenerg-671	72	4	two	two	NUM
fuelectenerg-671	72	5	-	-	PUNCT
fuelectenerg-671	72	6	contact	contact	NOUN
fuelectenerg-671	72	7	circular	circular	ADJ
fuelectenerg-671	72	8	test	test	NOUN
fuelectenerg-671	72	9	patterns	pattern	NOUN
fuelectenerg-671	72	10	were	be	AUX
fuelectenerg-671	72	11	prepared	prepare	VERB
fuelectenerg-671	72	12	on	on	ADP
fuelectenerg-671	72	13	p	p	ADJ
fuelectenerg-671	72	14	-	-	PUNCT
fuelectenerg-671	72	15	type	type	NOUN
fuelectenerg-671	72	16	germanium	germanium	NOUN
fuelectenerg-671	72	17	substrate	substrate	NOUN
fuelectenerg-671	72	18	.	.	PUNCT
fuelectenerg-671	73	1	the	the	DET
fuelectenerg-671	73	2	geometries	geometry	NOUN
fuelectenerg-671	73	3	vary	vary	VERB
fuelectenerg-671	73	4	from	from	ADP
fuelectenerg-671	73	5	r0	r0	NOUN
fuelectenerg-671	73	6	=	=	PUNCT
fuelectenerg-671	73	7	6	6	NUM
fuelectenerg-671	73	8	μm	μm	NOUN
fuelectenerg-671	73	9	,	,	PUNCT
fuelectenerg-671	73	10	r1	r1	NOUN
fuelectenerg-671	73	11	=	=	PUNCT
fuelectenerg-671	73	12	10	10	NUM
fuelectenerg-671	73	13	μm	μm	NUM
fuelectenerg-671	73	14	and	and	CCONJ
fuelectenerg-671	73	15	r2	r2	PROPN
fuelectenerg-671	73	16	=	=	PUNCT
fuelectenerg-671	73	17	18	18	NUM
fuelectenerg-671	73	18	μm	μm	NOUN
fuelectenerg-671	73	19	to	to	PART
fuelectenerg-671	73	20	r0	r0	VERB
fuelectenerg-671	73	21	=	=	PUNCT
fuelectenerg-671	73	22	24	24	NUM
fuelectenerg-671	73	23	μm	μm	NUM
fuelectenerg-671	73	24	,	,	PUNCT
fuelectenerg-671	73	25	r1	r1	NOUN
fuelectenerg-671	73	26	=	=	PUNCT
fuelectenerg-671	73	27	40	40	NUM
fuelectenerg-671	73	28	μm	μm	NUM
fuelectenerg-671	73	29	and	and	CCONJ
fuelectenerg-671	73	30	r2	r2	PROPN
fuelectenerg-671	73	31	=	=	SYM
fuelectenerg-671	74	1	72	72	NUM
fuelectenerg-671	74	2	μm	μm	NOUN
fuelectenerg-671	74	3	.	.	PUNCT
fuelectenerg-671	74	4	fig	fig	NOUN
fuelectenerg-671	74	5	.	.	PUNCT
fuelectenerg-671	75	1	5	5	NUM
fuelectenerg-671	75	2	shows	show	VERB
fuelectenerg-671	75	3	an	an	DET
fuelectenerg-671	75	4	optical	optical	ADJ
fuelectenerg-671	75	5	micrograph	micrograph	NOUN
fuelectenerg-671	75	6	of	of	ADP
fuelectenerg-671	75	7	an	an	DET
fuelectenerg-671	75	8	example	example	NOUN
fuelectenerg-671	75	9	pattern	pattern	NOUN
fuelectenerg-671	75	10	fabricated	fabricate	VERB
fuelectenerg-671	75	11	with	with	ADP
fuelectenerg-671	75	12	r0	r0	NOUN
fuelectenerg-671	75	13	=	=	PUNCT
fuelectenerg-671	75	14	15	15	NUM
fuelectenerg-671	75	15	μm	μm	NOUN
fuelectenerg-671	75	16	,	,	PUNCT
fuelectenerg-671	75	17	r1	r1	NOUN
fuelectenerg-671	75	18	=	=	PUNCT
fuelectenerg-671	75	19	25	25	NUM
fuelectenerg-671	75	20	μm	μm	NUM
fuelectenerg-671	75	21	and	and	CCONJ
fuelectenerg-671	75	22	r2	r2	PROPN
fuelectenerg-671	75	23	=	=	PUNCT
fuelectenerg-671	75	24	45	45	NUM
fuelectenerg-671	75	25	μm	μm	NOUN
fuelectenerg-671	75	26	.	.	PUNCT
fuelectenerg-671	75	27	fig	fig	NOUN
fuelectenerg-671	75	28	.	.	PUNCT
fuelectenerg-671	76	1	5	5	NUM
fuelectenerg-671	76	2	optical	optical	ADJ
fuelectenerg-671	76	3	micrograph	micrograph	NOUN
fuelectenerg-671	76	4	of	of	ADP
fuelectenerg-671	76	5	a	a	DET
fuelectenerg-671	76	6	two	two	NUM
fuelectenerg-671	76	7	-	-	PUNCT
fuelectenerg-671	76	8	contact	contact	NOUN
fuelectenerg-671	76	9	circular	circular	ADJ
fuelectenerg-671	76	10	test	test	NOUN
fuelectenerg-671	76	11	structure	structure	NOUN
fuelectenerg-671	76	12	fabricated	fabricate	VERB
fuelectenerg-671	76	13	on	on	ADP
fuelectenerg-671	76	14	p	p	NOUN
fuelectenerg-671	76	15	-	-	PUNCT
fuelectenerg-671	76	16	type	type	NOUN
fuelectenerg-671	76	17	ge	ge	PROPN
fuelectenerg-671	76	18	.	.	PUNCT
fuelectenerg-671	77	1	the	the	DET
fuelectenerg-671	77	2	geometry	geometry	NOUN
fuelectenerg-671	77	3	size	size	NOUN
fuelectenerg-671	77	4	is	be	AUX
fuelectenerg-671	77	5	r0	r0	NOUN
fuelectenerg-671	77	6	=	=	PUNCT
fuelectenerg-671	77	7	15	15	NUM
fuelectenerg-671	77	8	μm	μm	NOUN
fuelectenerg-671	77	9	,	,	PUNCT
fuelectenerg-671	77	10	r1	r1	NOUN
fuelectenerg-671	77	11	=	=	PUNCT
fuelectenerg-671	77	12	25	25	NUM
fuelectenerg-671	77	13	μm	μm	NUM
fuelectenerg-671	77	14	and	and	CCONJ
fuelectenerg-671	77	15	r2	r2	PROPN
fuelectenerg-671	77	16	=	=	PUNCT
fuelectenerg-671	77	17	45	45	NUM
fuelectenerg-671	77	18	μm	μm	NOUN
fuelectenerg-671	77	19	.	.	PUNCT
fuelectenerg-671	78	1	the	the	DET
fuelectenerg-671	78	2	contacts	contact	NOUN
fuelectenerg-671	78	3	are	be	AUX
fuelectenerg-671	78	4	prepared	prepare	VERB
fuelectenerg-671	78	5	in	in	ADP
fuelectenerg-671	78	6	the	the	DET
fuelectenerg-671	78	7	following	following	ADJ
fuelectenerg-671	78	8	way	way	NOUN
fuelectenerg-671	78	9	.	.	PUNCT
fuelectenerg-671	79	1	the	the	DET
fuelectenerg-671	79	2	p	p	NOUN
fuelectenerg-671	79	3	-	-	PUNCT
fuelectenerg-671	79	4	type	type	NOUN
fuelectenerg-671	79	5	3	3	NUM
fuelectenerg-671	79	6	inch	inch	NOUN
fuelectenerg-671	79	7	germanium	germanium	NOUN
fuelectenerg-671	79	8	wafer	wafer	NOUN
fuelectenerg-671	79	9	with	with	ADP
fuelectenerg-671	79	10	a	a	DET
fuelectenerg-671	79	11	thickness	thickness	NOUN
fuelectenerg-671	79	12	of	of	ADP
fuelectenerg-671	79	13	220	220	NUM
fuelectenerg-671	79	14	μm	μm	NOUN
fuelectenerg-671	79	15	was	be	AUX
fuelectenerg-671	79	16	diced	dice	VERB
fuelectenerg-671	79	17	into	into	ADP
fuelectenerg-671	79	18	squares	square	NOUN
fuelectenerg-671	79	19	with	with	ADP
fuelectenerg-671	79	20	dimensions	dimension	NOUN
fuelectenerg-671	79	21	of	of	ADP
fuelectenerg-671	79	22	1×1	1×1	NUM
fuelectenerg-671	79	23	cm	cm	NOUN
fuelectenerg-671	79	24	2	2	NUM
fuelectenerg-671	79	25	and	and	CCONJ
fuelectenerg-671	79	26	462	462	NUM
fuelectenerg-671	79	27	a.	a.	NOUN
fuelectenerg-671	79	28	m.	m.	PROPN
fuelectenerg-671	79	29	collins	collins	PROPN
fuelectenerg-671	79	30	,	,	PUNCT
fuelectenerg-671	79	31	y.	y.	PROPN
fuelectenerg-671	79	32	pan	pan	PROPN
fuelectenerg-671	79	33	,	,	PUNCT
fuelectenerg-671	79	34	a.	a.	PROPN
fuelectenerg-671	79	35	s.	s.	PROPN
fuelectenerg-671	79	36	holland	holland	PROPN
fuelectenerg-671	79	37	cleaned	clean	VERB
fuelectenerg-671	79	38	in	in	ADP
fuelectenerg-671	79	39	az	az	PROPN
fuelectenerg-671	79	40	100	100	NUM
fuelectenerg-671	79	41	solvent	solvent	NOUN
fuelectenerg-671	79	42	at	at	ADP
fuelectenerg-671	79	43	80	80	NUM
fuelectenerg-671	79	44	ºc	ºc	NOUN
fuelectenerg-671	79	45	for	for	ADP
fuelectenerg-671	79	46	15	15	NUM
fuelectenerg-671	79	47	minutes	minute	NOUN
fuelectenerg-671	79	48	followed	follow	VERB
fuelectenerg-671	79	49	by	by	ADP
fuelectenerg-671	79	50	acetone	acetone	NOUN
fuelectenerg-671	79	51	,	,	PUNCT
fuelectenerg-671	79	52	isopropal	isopropal	ADJ
fuelectenerg-671	79	53	alcohol	alcohol	NOUN
fuelectenerg-671	79	54	and	and	CCONJ
fuelectenerg-671	79	55	deionized	deionize	VERB
fuelectenerg-671	79	56	water	water	NOUN
fuelectenerg-671	79	57	and	and	CCONJ
fuelectenerg-671	79	58	dried	dry	VERB
fuelectenerg-671	79	59	in	in	ADP
fuelectenerg-671	79	60	nitrogen	nitrogen	NOUN
fuelectenerg-671	79	61	gas	gas	NOUN
fuelectenerg-671	79	62	.	.	PUNCT
fuelectenerg-671	80	1	az	az	PROPN
fuelectenerg-671	80	2	1512	1512	NUM
fuelectenerg-671	80	3	was	be	AUX
fuelectenerg-671	80	4	then	then	ADV
fuelectenerg-671	80	5	spin	spin	VERB
fuelectenerg-671	80	6	coated	coat	VERB
fuelectenerg-671	80	7	on	on	ADP
fuelectenerg-671	80	8	the	the	DET
fuelectenerg-671	80	9	surface	surface	NOUN
fuelectenerg-671	80	10	of	of	ADP
fuelectenerg-671	80	11	the	the	DET
fuelectenerg-671	80	12	wafers	wafer	NOUN
fuelectenerg-671	80	13	followed	follow	VERB
fuelectenerg-671	80	14	by	by	ADP
fuelectenerg-671	80	15	soft	soft	ADJ
fuelectenerg-671	80	16	baking	baking	NOUN
fuelectenerg-671	80	17	at	at	ADP
fuelectenerg-671	80	18	90	90	NUM
fuelectenerg-671	80	19	ºc	ºc	NOUN
fuelectenerg-671	80	20	for	for	ADP
fuelectenerg-671	80	21	90	90	NUM
fuelectenerg-671	80	22	seconds	second	NOUN
fuelectenerg-671	80	23	.	.	PUNCT
fuelectenerg-671	81	1	after	after	ADP
fuelectenerg-671	81	2	removing	remove	VERB
fuelectenerg-671	81	3	the	the	DET
fuelectenerg-671	81	4	edge	edge	NOUN
fuelectenerg-671	81	5	bead	bead	NOUN
fuelectenerg-671	81	6	of	of	ADP
fuelectenerg-671	81	7	the	the	DET
fuelectenerg-671	81	8	photoresist	photoresist	NOUN
fuelectenerg-671	81	9	,	,	PUNCT
fuelectenerg-671	81	10	the	the	DET
fuelectenerg-671	81	11	wafers	wafer	NOUN
fuelectenerg-671	81	12	were	be	AUX
fuelectenerg-671	81	13	exposed	expose	VERB
fuelectenerg-671	81	14	to	to	ADP
fuelectenerg-671	81	15	uv	uv	NOUN
fuelectenerg-671	81	16	light	light	NOUN
fuelectenerg-671	81	17	for	for	ADP
fuelectenerg-671	81	18	8	8	NUM
fuelectenerg-671	81	19	seconds	second	NOUN
fuelectenerg-671	81	20	,	,	PUNCT
fuelectenerg-671	81	21	soaked	soak	VERB
fuelectenerg-671	81	22	in	in	ADP
fuelectenerg-671	81	23	chlorobenzene	chlorobenzene	NOUN
fuelectenerg-671	81	24	for	for	ADP
fuelectenerg-671	81	25	60	60	NUM
fuelectenerg-671	81	26	seconds	second	NOUN
fuelectenerg-671	81	27	and	and	CCONJ
fuelectenerg-671	81	28	developed	develop	VERB
fuelectenerg-671	81	29	in	in	ADP
fuelectenerg-671	81	30	1:4	1:4	NUM
fuelectenerg-671	81	31	di	di	NOUN
fuelectenerg-671	81	32	water	water	NOUN
fuelectenerg-671	81	33	:	:	PUNCT
fuelectenerg-671	81	34	az	az	PROPN
fuelectenerg-671	81	35	400k	400k	PROPN
fuelectenerg-671	81	36	for	for	ADP
fuelectenerg-671	81	37	25	25	NUM
fuelectenerg-671	81	38	seconds	second	NOUN
fuelectenerg-671	81	39	.	.	PUNCT
fuelectenerg-671	82	1	after	after	ADP
fuelectenerg-671	82	2	deposit	deposit	NOUN
fuelectenerg-671	83	1	200	200	NUM
fuelectenerg-671	83	2	nm	nm	NOUN
fuelectenerg-671	83	3	ni	ni	PROPN
fuelectenerg-671	83	4	on	on	ADP
fuelectenerg-671	83	5	the	the	DET
fuelectenerg-671	83	6	ge	ge	PROPN
fuelectenerg-671	83	7	substrate	substrate	NOUN
fuelectenerg-671	83	8	by	by	ADP
fuelectenerg-671	83	9	electron	electron	NOUN
fuelectenerg-671	83	10	beam	beam	NOUN
fuelectenerg-671	83	11	evaporation	evaporation	NOUN
fuelectenerg-671	83	12	and	and	CCONJ
fuelectenerg-671	83	13	soaked	soak	VERB
fuelectenerg-671	83	14	in	in	ADP
fuelectenerg-671	83	15	acetone	acetone	NOUN
fuelectenerg-671	83	16	,	,	PUNCT
fuelectenerg-671	83	17	the	the	DET
fuelectenerg-671	83	18	ni	ni	NOUN
fuelectenerg-671	83	19	electrodes	electrode	VERB
fuelectenerg-671	83	20	patterns	pattern	NOUN
fuelectenerg-671	83	21	were	be	AUX
fuelectenerg-671	83	22	formed	form	VERB
fuelectenerg-671	83	23	by	by	ADP
fuelectenerg-671	83	24	lift	lift	VERB
fuelectenerg-671	83	25	off	off	ADP
fuelectenerg-671	83	26	technique	technique	NOUN
fuelectenerg-671	83	27	using	use	VERB
fuelectenerg-671	83	28	ultra	ultra	ADJ
fuelectenerg-671	83	29	sound	sound	ADJ
fuelectenerg-671	83	30	equipment	equipment	NOUN
fuelectenerg-671	83	31	at	at	ADP
fuelectenerg-671	83	32	90º	90º	PROPN
fuelectenerg-671	83	33	c	c	PROPN
fuelectenerg-671	83	34	for	for	ADP
fuelectenerg-671	83	35	30	30	NUM
fuelectenerg-671	83	36	minutes	minute	NOUN
fuelectenerg-671	83	37	.	.	PUNCT
fuelectenerg-671	84	1	finally	finally	ADV
fuelectenerg-671	84	2	,	,	PUNCT
fuelectenerg-671	84	3	the	the	DET
fuelectenerg-671	84	4	wafers	wafer	NOUN
fuelectenerg-671	84	5	were	be	AUX
fuelectenerg-671	84	6	cleaned	clean	VERB
fuelectenerg-671	84	7	in	in	ADP
fuelectenerg-671	84	8	deionized	deionize	VERB
fuelectenerg-671	84	9	water	water	NOUN
fuelectenerg-671	84	10	and	and	CCONJ
fuelectenerg-671	84	11	dried	dry	VERB
fuelectenerg-671	84	12	using	use	VERB
fuelectenerg-671	84	13	nitrogen	nitrogen	NOUN
fuelectenerg-671	84	14	gas	gas	NOUN
fuelectenerg-671	84	15	.	.	PUNCT
fuelectenerg-671	85	1	the	the	DET
fuelectenerg-671	85	2	same	same	ADJ
fuelectenerg-671	85	3	process	process	NOUN
fuelectenerg-671	85	4	was	be	AUX
fuelectenerg-671	85	5	conducted	conduct	VERB
fuelectenerg-671	85	6	in	in	ADP
fuelectenerg-671	85	7	order	order	NOUN
fuelectenerg-671	85	8	to	to	PART
fuelectenerg-671	85	9	prepare	prepare	VERB
fuelectenerg-671	85	10	the	the	DET
fuelectenerg-671	85	11	sic	sic	ADJ
fuelectenerg-671	85	12	substrates	substrate	NOUN
fuelectenerg-671	85	13	with	with	ADP
fuelectenerg-671	85	14	ti	ti	NOUN
fuelectenerg-671	85	15	deposited	deposit	VERB
fuelectenerg-671	85	16	to	to	ADP
fuelectenerg-671	85	17	a	a	DET
fuelectenerg-671	85	18	thickness	thickness	NOUN
fuelectenerg-671	85	19	of	of	ADP
fuelectenerg-671	85	20	200	200	NUM
fuelectenerg-671	85	21	nm	nm	NOUN
fuelectenerg-671	85	22	.	.	PUNCT
fuelectenerg-671	86	1	in	in	ADP
fuelectenerg-671	86	2	addition	addition	NOUN
fuelectenerg-671	86	3	to	to	ADP
fuelectenerg-671	86	4	the	the	DET
fuelectenerg-671	86	5	photolithographic	photolithographic	ADJ
fuelectenerg-671	86	6	steps	step	NOUN
fuelectenerg-671	86	7	as	as	SCONJ
fuelectenerg-671	86	8	discussed	discuss	VERB
fuelectenerg-671	86	9	the	the	DET
fuelectenerg-671	86	10	sic	sic	ADJ
fuelectenerg-671	86	11	samples	sample	NOUN
fuelectenerg-671	86	12	were	be	AUX
fuelectenerg-671	86	13	heat	heat	NOUN
fuelectenerg-671	86	14	treated	treat	VERB
fuelectenerg-671	86	15	at	at	ADP
fuelectenerg-671	86	16	1100	1100	NUM
fuelectenerg-671	86	17	ºc	ºc	PROPN
fuelectenerg-671	86	18	for	for	ADP
fuelectenerg-671	86	19	30	30	NUM
fuelectenerg-671	86	20	minutes	minute	NOUN
fuelectenerg-671	86	21	in	in	ADP
fuelectenerg-671	86	22	an	an	DET
fuelectenerg-671	86	23	argon	argon	NOUN
fuelectenerg-671	86	24	environment	environment	NOUN
fuelectenerg-671	86	25	.	.	PUNCT
fuelectenerg-671	87	1	it	it	PRON
fuelectenerg-671	87	2	is	be	AUX
fuelectenerg-671	87	3	known	know	VERB
fuelectenerg-671	87	4	that	that	SCONJ
fuelectenerg-671	87	5	ti	ti	NOUN
fuelectenerg-671	87	6	and	and	CCONJ
fuelectenerg-671	87	7	sic	sic	ADJ
fuelectenerg-671	87	8	will	will	AUX
fuelectenerg-671	87	9	produce	produce	VERB
fuelectenerg-671	87	10	a	a	DET
fuelectenerg-671	87	11	schottky	schottky	NOUN
fuelectenerg-671	87	12	contact	contact	NOUN
fuelectenerg-671	87	13	when	when	SCONJ
fuelectenerg-671	87	14	deposited	deposit	VERB
fuelectenerg-671	87	15	with	with	ADP
fuelectenerg-671	87	16	no	no	DET
fuelectenerg-671	87	17	treatment	treatment	NOUN
fuelectenerg-671	87	18	applied	apply	VERB
fuelectenerg-671	87	19	.	.	PUNCT
fuelectenerg-671	88	1	therefore	therefore	ADV
fuelectenerg-671	88	2	this	this	DET
fuelectenerg-671	88	3	extra	extra	ADJ
fuelectenerg-671	88	4	step	step	NOUN
fuelectenerg-671	88	5	was	be	AUX
fuelectenerg-671	88	6	taken	take	VERB
fuelectenerg-671	88	7	to	to	PART
fuelectenerg-671	88	8	ensure	ensure	VERB
fuelectenerg-671	88	9	that	that	SCONJ
fuelectenerg-671	88	10	the	the	DET
fuelectenerg-671	88	11	ti	ti	NOUN
fuelectenerg-671	88	12	contacted	contact	VERB
fuelectenerg-671	88	13	the	the	DET
fuelectenerg-671	88	14	sic	sic	ADJ
fuelectenerg-671	88	15	uniformly	uniformly	ADV
fuelectenerg-671	88	16	and	and	CCONJ
fuelectenerg-671	88	17	to	to	PART
fuelectenerg-671	88	18	create	create	VERB
fuelectenerg-671	88	19	an	an	DET
fuelectenerg-671	88	20	ohmic	ohmic	ADJ
fuelectenerg-671	88	21	contact	contact	NOUN
fuelectenerg-671	88	22	.	.	PUNCT
fuelectenerg-671	89	1	fig	fig	NOUN
fuelectenerg-671	89	2	.	.	PUNCT
fuelectenerg-671	90	1	6	6	NUM
fuelectenerg-671	90	2	optical	optical	ADJ
fuelectenerg-671	90	3	micrograph	micrograph	NOUN
fuelectenerg-671	90	4	of	of	ADP
fuelectenerg-671	90	5	a	a	DET
fuelectenerg-671	90	6	two	two	NUM
fuelectenerg-671	90	7	-	-	PUNCT
fuelectenerg-671	90	8	contact	contact	NOUN
fuelectenerg-671	90	9	circular	circular	ADJ
fuelectenerg-671	90	10	test	test	NOUN
fuelectenerg-671	90	11	structure	structure	NOUN
fuelectenerg-671	90	12	fabricated	fabricate	VERB
fuelectenerg-671	90	13	on	on	ADP
fuelectenerg-671	90	14	n	n	CCONJ
fuelectenerg-671	90	15	-	-	PUNCT
fuelectenerg-671	90	16	type	type	NOUN
fuelectenerg-671	90	17	4h	4h	NOUN
fuelectenerg-671	90	18	-	-	PUNCT
fuelectenerg-671	90	19	sic	sic	NOUN
fuelectenerg-671	90	20	.	.	PUNCT
fuelectenerg-671	91	1	the	the	DET
fuelectenerg-671	91	2	geometry	geometry	NOUN
fuelectenerg-671	91	3	size	size	NOUN
fuelectenerg-671	91	4	is	be	AUX
fuelectenerg-671	91	5	:	:	PUNCT
fuelectenerg-671	91	6	r0	r0	NOUN
fuelectenerg-671	91	7	=	=	SYM
fuelectenerg-671	91	8	30	30	NUM
fuelectenerg-671	91	9	μm	μm	NOUN
fuelectenerg-671	91	10	,	,	PUNCT
fuelectenerg-671	91	11	r1	r1	NOUN
fuelectenerg-671	91	12	=	=	PUNCT
fuelectenerg-671	91	13	50	50	NUM
fuelectenerg-671	91	14	μm	μm	NOUN
fuelectenerg-671	91	15	and	and	CCONJ
fuelectenerg-671	91	16	r2	r2	PROPN
fuelectenerg-671	91	17	=	=	NOUN
fuelectenerg-671	91	18	90	90	NUM
fuelectenerg-671	91	19	μm	μm	NOUN
fuelectenerg-671	91	20	.	.	PUNCT
fuelectenerg-671	92	1	resistivity	resistivity	NOUN
fuelectenerg-671	92	2	for	for	ADP
fuelectenerg-671	92	3	ge	ge	PROPN
fuelectenerg-671	92	4	substrate	substrate	NOUN
fuelectenerg-671	92	5	was	be	AUX
fuelectenerg-671	92	6	determined	determine	VERB
fuelectenerg-671	92	7	before	before	SCONJ
fuelectenerg-671	92	8	the	the	DET
fuelectenerg-671	92	9	wafer	wafer	NOUN
fuelectenerg-671	92	10	was	be	AUX
fuelectenerg-671	92	11	diced	dice	VERB
fuelectenerg-671	92	12	using	use	VERB
fuelectenerg-671	92	13	four	four	NUM
fuelectenerg-671	92	14	point	point	NOUN
fuelectenerg-671	92	15	probe	probe	NOUN
fuelectenerg-671	92	16	technique	technique	NOUN
fuelectenerg-671	92	17	and	and	CCONJ
fuelectenerg-671	92	18	it	it	PRON
fuelectenerg-671	92	19	was	be	AUX
fuelectenerg-671	92	20	determined	determined	ADJ
fuelectenerg-671	92	21	to	to	PART
fuelectenerg-671	92	22	be	be	AUX
fuelectenerg-671	92	23	0.035	0.035	NUM
fuelectenerg-671	92	24	ω·cm	ω·cm	NUM
fuelectenerg-671	92	25	.	.	PUNCT
fuelectenerg-671	93	1	measurements	measurement	NOUN
fuelectenerg-671	93	2	were	be	AUX
fuelectenerg-671	93	3	taken	take	VERB
fuelectenerg-671	93	4	for	for	ADP
fuelectenerg-671	93	5	ten	ten	NUM
fuelectenerg-671	93	6	different	different	ADJ
fuelectenerg-671	93	7	dimensions	dimension	NOUN
fuelectenerg-671	93	8	of	of	ADP
fuelectenerg-671	93	9	the	the	DET
fuelectenerg-671	93	10	test	test	NOUN
fuelectenerg-671	93	11	patterns	pattern	NOUN
fuelectenerg-671	93	12	described	describe	VERB
fuelectenerg-671	93	13	above	above	ADV
fuelectenerg-671	93	14	.	.	PUNCT
fuelectenerg-671	94	1	a	a	DET
fuelectenerg-671	94	2	probing	probe	VERB
fuelectenerg-671	94	3	station	station	NOUN
fuelectenerg-671	94	4	with	with	ADP
fuelectenerg-671	94	5	0.6	0.6	NUM
fuelectenerg-671	94	6	μm	μm	NOUN
fuelectenerg-671	94	7	radius	radius	NOUN
fuelectenerg-671	94	8	tips	tip	NOUN
fuelectenerg-671	94	9	,	,	PUNCT
fuelectenerg-671	94	10	a	a	DET
fuelectenerg-671	94	11	multi	multi	ADJ
fuelectenerg-671	94	12	meter	meter	NOUN
fuelectenerg-671	94	13	and	and	CCONJ
fuelectenerg-671	94	14	a	a	DET
fuelectenerg-671	94	15	current	current	ADJ
fuelectenerg-671	94	16	supply	supply	NOUN
fuelectenerg-671	94	17	were	be	AUX
fuelectenerg-671	94	18	used	use	VERB
fuelectenerg-671	94	19	in	in	ADP
fuelectenerg-671	94	20	the	the	DET
fuelectenerg-671	94	21	measurements	measurement	NOUN
fuelectenerg-671	94	22	.	.	PUNCT
fuelectenerg-671	95	1	the	the	DET
fuelectenerg-671	95	2	current	current	ADJ
fuelectenerg-671	95	3	/	/	SYM
fuelectenerg-671	95	4	voltage	voltage	NOUN
fuelectenerg-671	95	5	characteristic	characteristic	NOUN
fuelectenerg-671	95	6	of	of	ADP
fuelectenerg-671	95	7	each	each	DET
fuelectenerg-671	95	8	two	two	NUM
fuelectenerg-671	95	9	-	-	PUNCT
fuelectenerg-671	95	10	contact	contact	NOUN
fuelectenerg-671	95	11	circular	circular	ADJ
fuelectenerg-671	95	12	pattern	pattern	NOUN
fuelectenerg-671	95	13	indicates	indicate	VERB
fuelectenerg-671	95	14	that	that	SCONJ
fuelectenerg-671	95	15	ohmic	ohmic	ADJ
fuelectenerg-671	95	16	contacts	contact	NOUN
fuelectenerg-671	95	17	were	be	AUX
fuelectenerg-671	95	18	generated	generate	VERB
fuelectenerg-671	95	19	between	between	ADP
fuelectenerg-671	95	20	as	as	ADV
fuelectenerg-671	95	21	-	-	PUNCT
fuelectenerg-671	95	22	deposited	deposit	VERB
fuelectenerg-671	95	23	ni	ni	PROPN
fuelectenerg-671	95	24	and	and	CCONJ
fuelectenerg-671	95	25	ge	ge	PROPN
fuelectenerg-671	95	26	.	.	PUNCT
fuelectenerg-671	96	1	the	the	DET
fuelectenerg-671	96	2	measured	measure	VERB
fuelectenerg-671	96	3	total	total	ADJ
fuelectenerg-671	96	4	resistance	resistance	NOUN
fuelectenerg-671	96	5	rt	rt	PROPN
fuelectenerg-671	96	6	ranged	range	VERB
fuelectenerg-671	96	7	from	from	ADP
fuelectenerg-671	96	8	4.78	4.78	NUM
fuelectenerg-671	96	9	ω	ω	NOUN
fuelectenerg-671	96	10	to	to	ADP
fuelectenerg-671	96	11	17.23	17.23	NUM
fuelectenerg-671	96	12	ω	ω	NOUN
fuelectenerg-671	96	13	with	with	ADP
fuelectenerg-671	96	14	different	different	ADJ
fuelectenerg-671	96	15	dimensions	dimension	NOUN
fuelectenerg-671	96	16	of	of	ADP
fuelectenerg-671	96	17	patterns	pattern	NOUN
fuelectenerg-671	96	18	.	.	PUNCT
fuelectenerg-671	97	1	the	the	DET
fuelectenerg-671	97	2	values	value	NOUN
fuelectenerg-671	97	3	of	of	ADP
fuelectenerg-671	97	4	ρc	ρc	PROPN
fuelectenerg-671	97	5	were	be	AUX
fuelectenerg-671	97	6	then	then	ADV
fuelectenerg-671	97	7	determined	determine	VERB
fuelectenerg-671	97	8	using	use	VERB
fuelectenerg-671	97	9	fig	fig	NOUN
fuelectenerg-671	97	10	.	.	PUNCT
fuelectenerg-671	98	1	4	4	NUM
fuelectenerg-671	98	2	and	and	CCONJ
fuelectenerg-671	98	3	(	(	PUNCT
fuelectenerg-671	98	4	3	3	NUM
fuelectenerg-671	98	5	)	)	PUNCT
fuelectenerg-671	98	6	and	and	CCONJ
fuelectenerg-671	98	7	varied	varied	ADJ
fuelectenerg-671	98	8	from	from	ADP
fuelectenerg-671	98	9	2.3×10	2.3×10	NUM
fuelectenerg-671	98	10	-6	-6	PROPN
fuelectenerg-671	98	11	ω·cm	ω·cm	NUM
fuelectenerg-671	98	12	2	2	NUM
fuelectenerg-671	98	13	to	to	ADP
fuelectenerg-671	98	14	2.7×10	2.7×10	NUM
fuelectenerg-671	98	15	-5	-5	NOUN
fuelectenerg-671	98	16	ω·cm	ω·cm	PROPN
fuelectenerg-671	98	17	2	2	NUM
fuelectenerg-671	98	18	.	.	PUNCT
fuelectenerg-671	99	1	this	this	PRON
fuelectenerg-671	99	2	can	can	AUX
fuelectenerg-671	99	3	be	be	AUX
fuelectenerg-671	99	4	seen	see	VERB
fuelectenerg-671	99	5	in	in	ADP
fuelectenerg-671	99	6	table	table	NOUN
fuelectenerg-671	99	7	1	1	NUM
fuelectenerg-671	99	8	.	.	PUNCT
fuelectenerg-671	99	9	using	use	VERB
fuelectenerg-671	99	10	a	a	DET
fuelectenerg-671	99	11	two	two	NUM
fuelectenerg-671	99	12	-	-	PUNCT
fuelectenerg-671	99	13	contact	contact	NOUN
fuelectenerg-671	99	14	circular	circular	ADJ
fuelectenerg-671	99	15	test	test	NOUN
fuelectenerg-671	99	16	structure	structure	NOUN
fuelectenerg-671	99	17	to	to	PART
fuelectenerg-671	99	18	determine	determine	VERB
fuelectenerg-671	99	19	the	the	DET
fuelectenerg-671	99	20	specific	specific	ADJ
fuelectenerg-671	99	21	contact	contact	NOUN
fuelectenerg-671	99	22	resistivity	resistivity	NOUN
fuelectenerg-671	99	23	...	...	PUNCT
fuelectenerg-671	99	24	463	463	NUM
fuelectenerg-671	99	25	table	table	NOUN
fuelectenerg-671	99	26	1	1	NUM
fuelectenerg-671	99	27	experimental	experimental	ADJ
fuelectenerg-671	99	28	results	result	NOUN
fuelectenerg-671	99	29	for	for	ADP
fuelectenerg-671	99	30	determining	determine	VERB
fuelectenerg-671	99	31	specific	specific	ADJ
fuelectenerg-671	99	32	contact	contact	NOUN
fuelectenerg-671	99	33	resistivity	resistivity	NOUN
fuelectenerg-671	99	34	for	for	ADP
fuelectenerg-671	99	35	as	as	ADV
fuelectenerg-671	99	36	-	-	PUNCT
fuelectenerg-671	99	37	deposited	deposit	VERB
fuelectenerg-671	99	38	nickel	nickel	NOUN
fuelectenerg-671	99	39	to	to	ADP
fuelectenerg-671	99	40	germanium	germanium	NOUN
fuelectenerg-671	99	41	substrate	substrate	NOUN
fuelectenerg-671	99	42	contacts	contact	NOUN
fuelectenerg-671	99	43	pattern	pattern	NOUN
fuelectenerg-671	99	44	gem	gem	NOUN
fuelectenerg-671	99	45	.	.	PUNCT
fuelectenerg-671	100	1	rt	rt	PROPN
fuelectenerg-671	100	2	(	(	PUNCT
fuelectenerg-671	100	3	ω	ω	PROPN
fuelectenerg-671	100	4	)	)	PUNCT
fuelectenerg-671	100	5	ρc	ρc	VERB
fuelectenerg-671	100	6	(	(	PUNCT
fuelectenerg-671	100	7	ω·cm	ω·cm	X
fuelectenerg-671	100	8	2	2	NUM
fuelectenerg-671	100	9	)	)	PUNCT
fuelectenerg-671	100	10	1	1	NUM
fuelectenerg-671	100	11	a	a	DET
fuelectenerg-671	100	12	15.68	15.68	NUM
fuelectenerg-671	100	13	3.7×10	3.7×10	NUM
fuelectenerg-671	100	14	-6	-6	PROPN
fuelectenerg-671	100	15	2	2	NUM
fuelectenerg-671	100	16	a	a	DET
fuelectenerg-671	100	17	17.23	17.23	NUM
fuelectenerg-671	100	18	6.5×10	6.5×10	NUM
fuelectenerg-671	100	19	-6	-6	NOUN
fuelectenerg-671	100	20	3	3	NUM
fuelectenerg-671	100	21	a	a	DET
fuelectenerg-671	100	22	14.77	14.77	NUM
fuelectenerg-671	100	23	2.3×10	2.3×10	NUM
fuelectenerg-671	100	24	-6	-6	PROPN
fuelectenerg-671	101	1	4	4	NUM
fuelectenerg-671	101	2	b	b	NOUN
fuelectenerg-671	101	3	6.98	6.98	NUM
fuelectenerg-671	101	4	1.3×10	1.3×10	NUM
fuelectenerg-671	101	5	-5	-5	NUM
fuelectenerg-671	101	6	5	5	NUM
fuelectenerg-671	101	7	b	b	NUM
fuelectenerg-671	101	8	6.48	6.48	NUM
fuelectenerg-671	101	9	1.1×10	1.1×10	NUM
fuelectenerg-671	101	10	-5	-5	NOUN
fuelectenerg-671	101	11	6	6	NUM
fuelectenerg-671	101	12	b	b	SYM
fuelectenerg-671	101	13	5.93	5.93	NUM
fuelectenerg-671	101	14	7.9×10	7.9×10	NUM
fuelectenerg-671	101	15	-6	-6	PROPN
fuelectenerg-671	101	16	7	7	NUM
fuelectenerg-671	101	17	b	b	SYM
fuelectenerg-671	101	18	5.54	5.54	NUM
fuelectenerg-671	101	19	5.3×10	5.3×10	NUM
fuelectenerg-671	101	20	-6	-6	NOUN
fuelectenerg-671	101	21	8	8	NUM
fuelectenerg-671	101	22	b	b	SYM
fuelectenerg-671	101	23	6.06	6.06	NUM
fuelectenerg-671	101	24	8.8×10	8.8×10	NUM
fuelectenerg-671	101	25	-6	-6	NOUN
fuelectenerg-671	101	26	9	9	NUM
fuelectenerg-671	101	27	c	c	NOUN
fuelectenerg-671	101	28	4.43	4.43	NUM
fuelectenerg-671	101	29	2.1×10	2.1×10	NUM
fuelectenerg-671	101	30	-5	-5	NUM
fuelectenerg-671	101	31	10	10	NUM
fuelectenerg-671	101	32	c	c	NOUN
fuelectenerg-671	101	33	4.78	4.78	NUM
fuelectenerg-671	101	34	2.7×10	2.7×10	NUM
fuelectenerg-671	101	35	-5	-5	NOUN
fuelectenerg-671	101	36	a	a	DET
fuelectenerg-671	101	37	:	:	PUNCT
fuelectenerg-671	101	38	r0	r0	NOUN
fuelectenerg-671	101	39	=	=	PUNCT
fuelectenerg-671	101	40	6	6	NUM
fuelectenerg-671	101	41	μm	μm	NOUN
fuelectenerg-671	101	42	,	,	PUNCT
fuelectenerg-671	101	43	r1	r1	NOUN
fuelectenerg-671	101	44	=	=	PUNCT
fuelectenerg-671	101	45	10	10	NUM
fuelectenerg-671	101	46	μm	μm	NOUN
fuelectenerg-671	101	47	,	,	PUNCT
fuelectenerg-671	101	48	r2	r2	PROPN
fuelectenerg-671	101	49	=	=	NOUN
fuelectenerg-671	101	50	18	18	NUM
fuelectenerg-671	101	51	μm	μm	NOUN
fuelectenerg-671	101	52	.	.	PUNCT
fuelectenerg-671	102	1	b	b	X
fuelectenerg-671	102	2	:	:	PUNCT
fuelectenerg-671	102	3	r0	r0	NOUN
fuelectenerg-671	102	4	=	=	PUNCT
fuelectenerg-671	102	5	15	15	NUM
fuelectenerg-671	102	6	μm	μm	NOUN
fuelectenerg-671	102	7	,	,	PUNCT
fuelectenerg-671	102	8	r1	r1	NOUN
fuelectenerg-671	102	9	=	=	PUNCT
fuelectenerg-671	102	10	25	25	NUM
fuelectenerg-671	102	11	μm	μm	NUM
fuelectenerg-671	102	12	,	,	PUNCT
fuelectenerg-671	102	13	r2	r2	PROPN
fuelectenerg-671	102	14	=	=	PUNCT
fuelectenerg-671	102	15	45	45	NUM
fuelectenerg-671	102	16	μm	μm	NOUN
fuelectenerg-671	102	17	.	.	PUNCT
fuelectenerg-671	103	1	c	c	X
fuelectenerg-671	103	2	:	:	PUNCT
fuelectenerg-671	103	3	r0	r0	NOUN
fuelectenerg-671	103	4	=	=	SYM
fuelectenerg-671	103	5	24	24	NUM
fuelectenerg-671	103	6	μm	μm	NUM
fuelectenerg-671	103	7	,	,	PUNCT
fuelectenerg-671	103	8	r1	r1	NOUN
fuelectenerg-671	103	9	=	=	PUNCT
fuelectenerg-671	103	10	40	40	NUM
fuelectenerg-671	103	11	μm	μm	NOUN
fuelectenerg-671	103	12	,	,	PUNCT
fuelectenerg-671	103	13	r2	r2	PROPN
fuelectenerg-671	103	14	=	=	NOUN
fuelectenerg-671	103	15	72	72	NUM
fuelectenerg-671	103	16	μm	μm	NUM
fuelectenerg-671	103	17	.	.	PUNCT
fuelectenerg-671	103	18	table	table	NOUN
fuelectenerg-671	103	19	2	2	NUM
fuelectenerg-671	103	20	experimental	experimental	ADJ
fuelectenerg-671	103	21	results	result	NOUN
fuelectenerg-671	103	22	for	for	ADP
fuelectenerg-671	103	23	determining	determine	VERB
fuelectenerg-671	103	24	specific	specific	ADJ
fuelectenerg-671	103	25	contact	contact	NOUN
fuelectenerg-671	103	26	resistivity	resistivity	NOUN
fuelectenerg-671	103	27	for	for	ADP
fuelectenerg-671	103	28	heat	heat	NOUN
fuelectenerg-671	103	29	treated	treat	VERB
fuelectenerg-671	103	30	titanium	titanium	NOUN
fuelectenerg-671	103	31	to	to	PART
fuelectenerg-671	103	32	silicon	silicon	VERB
fuelectenerg-671	103	33	carbide	carbide	ADJ
fuelectenerg-671	103	34	substrate	substrate	NOUN
fuelectenerg-671	103	35	contacts	contact	NOUN
fuelectenerg-671	103	36	pattern	pattern	NOUN
fuelectenerg-671	103	37	gem	gem	NOUN
fuelectenerg-671	103	38	.	.	PUNCT
fuelectenerg-671	104	1	rt	rt	PROPN
fuelectenerg-671	104	2	(	(	PUNCT
fuelectenerg-671	104	3	ω	ω	PROPN
fuelectenerg-671	104	4	)	)	PUNCT
fuelectenerg-671	104	5	ρc	ρc	VERB
fuelectenerg-671	104	6	(	(	PUNCT
fuelectenerg-671	104	7	ω·cm	ω·cm	X
fuelectenerg-671	104	8	2	2	NUM
fuelectenerg-671	104	9	)	)	PUNCT
fuelectenerg-671	104	10	1	1	NUM
fuelectenerg-671	104	11	c	c	PROPN
fuelectenerg-671	104	12	140	140	NUM
fuelectenerg-671	104	13	2.4×10	2.4×10	NUM
fuelectenerg-671	104	14	-3	-3	SYM
fuelectenerg-671	104	15	2	2	NUM
fuelectenerg-671	104	16	c	c	NOUN
fuelectenerg-671	104	17	125	125	NUM
fuelectenerg-671	104	18	1.8×10	1.8×10	NUM
fuelectenerg-671	104	19	-3	-3	SYM
fuelectenerg-671	104	20	3	3	NUM
fuelectenerg-671	104	21	c	c	NOUN
fuelectenerg-671	104	22	129	129	NUM
fuelectenerg-671	104	23	1.9×10	1.9×10	NUM
fuelectenerg-671	104	24	-3	-3	SYM
fuelectenerg-671	104	25	4	4	NUM
fuelectenerg-671	104	26	c	c	NOUN
fuelectenerg-671	104	27	137	137	NUM
fuelectenerg-671	104	28	2.1×10	2.1×10	NUM
fuelectenerg-671	104	29	-3	-3	SYM
fuelectenerg-671	104	30	5	5	NUM
fuelectenerg-671	104	31	c	c	NOUN
fuelectenerg-671	104	32	150	150	NUM
fuelectenerg-671	104	33	2.4×10	2.4×10	NUM
fuelectenerg-671	104	34	-3	-3	SYM
fuelectenerg-671	104	35	6	6	NUM
fuelectenerg-671	104	36	d	d	SYM
fuelectenerg-671	104	37	70	70	NUM
fuelectenerg-671	104	38	1.5×10	1.5×10	NUM
fuelectenerg-671	104	39	-3	-3	SYM
fuelectenerg-671	104	40	7	7	NUM
fuelectenerg-671	104	41	d	d	SYM
fuelectenerg-671	104	42	63	63	NUM
fuelectenerg-671	104	43	1.3×10	1.3×10	NUM
fuelectenerg-671	104	44	-3	-3	SYM
fuelectenerg-671	104	45	8	8	NUM
fuelectenerg-671	105	1	d	d	SYM
fuelectenerg-671	105	2	96	96	NUM
fuelectenerg-671	105	3	2.1×10	2.1×10	NUM
fuelectenerg-671	105	4	-3	-3	SYM
fuelectenerg-671	105	5	9	9	NUM
fuelectenerg-671	105	6	d	d	SYM
fuelectenerg-671	105	7	103	103	NUM
fuelectenerg-671	105	8	2.4×10	2.4×10	NUM
fuelectenerg-671	105	9	-3	-3	SYM
fuelectenerg-671	105	10	10	10	NUM
fuelectenerg-671	105	11	d	d	SYM
fuelectenerg-671	105	12	98	98	NUM
fuelectenerg-671	105	13	2.1×10	2.1×10	NUM
fuelectenerg-671	105	14	-3	-3	SYM
fuelectenerg-671	105	15	c	c	X
fuelectenerg-671	105	16	:	:	PUNCT
fuelectenerg-671	105	17	r0	r0	NOUN
fuelectenerg-671	105	18	=	=	SYM
fuelectenerg-671	105	19	24	24	NUM
fuelectenerg-671	105	20	μm	μm	NUM
fuelectenerg-671	105	21	,	,	PUNCT
fuelectenerg-671	105	22	r1	r1	NOUN
fuelectenerg-671	105	23	=	=	PUNCT
fuelectenerg-671	105	24	40	40	NUM
fuelectenerg-671	105	25	μm	μm	NOUN
fuelectenerg-671	105	26	,	,	PUNCT
fuelectenerg-671	105	27	r2	r2	PROPN
fuelectenerg-671	105	28	=	=	NOUN
fuelectenerg-671	105	29	72	72	NUM
fuelectenerg-671	105	30	μm	μm	NOUN
fuelectenerg-671	105	31	.	.	PUNCT
fuelectenerg-671	106	1	d	d	X
fuelectenerg-671	106	2	:	:	PUNCT
fuelectenerg-671	106	3	r0	r0	NOUN
fuelectenerg-671	106	4	=	=	SYM
fuelectenerg-671	106	5	30	30	NUM
fuelectenerg-671	106	6	μm	μm	NOUN
fuelectenerg-671	106	7	,	,	PUNCT
fuelectenerg-671	106	8	r1	r1	NOUN
fuelectenerg-671	106	9	=	=	PUNCT
fuelectenerg-671	106	10	50	50	NUM
fuelectenerg-671	106	11	μm	μm	NOUN
fuelectenerg-671	106	12	,	,	PUNCT
fuelectenerg-671	106	13	r2	r2	PROPN
fuelectenerg-671	106	14	=	=	NOUN
fuelectenerg-671	107	1	90	90	NUM
fuelectenerg-671	107	2	μm	μm	NOUN
fuelectenerg-671	107	3	.	.	PUNCT
fuelectenerg-671	108	1	similarly	similarly	ADV
fuelectenerg-671	108	2	to	to	ADP
fuelectenerg-671	108	3	the	the	DET
fuelectenerg-671	108	4	ge	ge	PROPN
fuelectenerg-671	108	5	substrate	substrate	NOUN
fuelectenerg-671	108	6	,	,	PUNCT
fuelectenerg-671	108	7	the	the	DET
fuelectenerg-671	108	8	sic	sic	ADJ
fuelectenerg-671	108	9	samples	sample	NOUN
fuelectenerg-671	108	10	had	have	VERB
fuelectenerg-671	108	11	the	the	DET
fuelectenerg-671	108	12	sheet	sheet	NOUN
fuelectenerg-671	108	13	resistance	resistance	NOUN
fuelectenerg-671	108	14	measured	measure	VERB
fuelectenerg-671	108	15	before	before	ADP
fuelectenerg-671	108	16	fabrication	fabrication	NOUN
fuelectenerg-671	108	17	using	use	VERB
fuelectenerg-671	108	18	the	the	DET
fuelectenerg-671	108	19	four	four	NUM
fuelectenerg-671	108	20	-	-	PUNCT
fuelectenerg-671	108	21	point	point	NOUN
fuelectenerg-671	108	22	probe	probe	NOUN
fuelectenerg-671	108	23	method	method	NOUN
fuelectenerg-671	108	24	.	.	PUNCT
fuelectenerg-671	109	1	from	from	ADP
fuelectenerg-671	109	2	this	this	DET
fuelectenerg-671	109	3	measurement	measurement	NOUN
fuelectenerg-671	109	4	the	the	DET
fuelectenerg-671	109	5	sheet	sheet	NOUN
fuelectenerg-671	109	6	resistance	resistance	NOUN
fuelectenerg-671	109	7	was	be	AUX
fuelectenerg-671	109	8	determined	determine	VERB
fuelectenerg-671	109	9	to	to	PART
fuelectenerg-671	109	10	be	be	AUX
fuelectenerg-671	109	11	0.01	0.01	NUM
fuelectenerg-671	109	12	ω	ω	NUM
fuelectenerg-671	109	13	cm	cm	NOUN
fuelectenerg-671	109	14	.	.	PUNCT
fuelectenerg-671	110	1	using	use	VERB
fuelectenerg-671	110	2	ten	ten	NUM
fuelectenerg-671	110	3	different	different	ADJ
fuelectenerg-671	110	4	patterns	pattern	NOUN
fuelectenerg-671	110	5	of	of	ADP
fuelectenerg-671	110	6	two	two	NUM
fuelectenerg-671	110	7	differing	differ	VERB
fuelectenerg-671	110	8	sizes	size	NOUN
fuelectenerg-671	110	9	,	,	PUNCT
fuelectenerg-671	110	10	measurements	measurement	NOUN
fuelectenerg-671	110	11	were	be	AUX
fuelectenerg-671	110	12	taken	take	VERB
fuelectenerg-671	110	13	as	as	ADP
fuelectenerg-671	110	14	per	per	ADP
fuelectenerg-671	110	15	the	the	DET
fuelectenerg-671	110	16	described	describe	VERB
fuelectenerg-671	110	17	method	method	NOUN
fuelectenerg-671	110	18	.	.	PUNCT
fuelectenerg-671	111	1	the	the	DET
fuelectenerg-671	111	2	resistance	resistance	NOUN
fuelectenerg-671	111	3	measurements	measurement	NOUN
fuelectenerg-671	111	4	taken	take	VERB
fuelectenerg-671	111	5	from	from	ADP
fuelectenerg-671	111	6	the	the	DET
fuelectenerg-671	111	7	patterns	pattern	NOUN
fuelectenerg-671	111	8	ranged	range	VERB
fuelectenerg-671	111	9	between	between	ADP
fuelectenerg-671	111	10	70	70	NUM
fuelectenerg-671	111	11	ω	ω	NUM
fuelectenerg-671	111	12	to	to	ADP
fuelectenerg-671	111	13	150	150	NUM
fuelectenerg-671	111	14	ω	ω	NOUN
fuelectenerg-671	111	15	as	as	SCONJ
fuelectenerg-671	111	16	the	the	DET
fuelectenerg-671	111	17	patterns	pattern	NOUN
fuelectenerg-671	111	18	became	become	VERB
fuelectenerg-671	111	19	smaller	small	ADJ
fuelectenerg-671	111	20	in	in	ADP
fuelectenerg-671	111	21	size	size	NOUN
fuelectenerg-671	111	22	.	.	PUNCT
fuelectenerg-671	112	1	with	with	ADP
fuelectenerg-671	112	2	these	these	DET
fuelectenerg-671	112	3	measurements	measurement	NOUN
fuelectenerg-671	112	4	taken	take	VERB
fuelectenerg-671	112	5	from	from	ADP
fuelectenerg-671	112	6	the	the	DET
fuelectenerg-671	112	7	sic	sic	ADJ
fuelectenerg-671	112	8	samples	sample	NOUN
fuelectenerg-671	112	9	,	,	PUNCT
fuelectenerg-671	112	10	ρc	ρc	PROPN
fuelectenerg-671	112	11	was	be	AUX
fuelectenerg-671	112	12	determined	determined	ADJ
fuelectenerg-671	112	13	to	to	PART
fuelectenerg-671	112	14	be	be	AUX
fuelectenerg-671	112	15	between	between	ADP
fuelectenerg-671	112	16	1.3×10	1.3×10	NUM
fuelectenerg-671	112	17	-3	-3	PUNCT
fuelectenerg-671	112	18	ω·cm	ω·cm	X
fuelectenerg-671	112	19	2	2	NUM
fuelectenerg-671	112	20	and	and	CCONJ
fuelectenerg-671	112	21	2.4×10	2.4×10	NUM
fuelectenerg-671	112	22	-3	-3	PUNCT
fuelectenerg-671	112	23	ω·cm	ω·cm	X
fuelectenerg-671	112	24	2	2	NUM
fuelectenerg-671	112	25	.	.	PUNCT
fuelectenerg-671	113	1	the	the	DET
fuelectenerg-671	113	2	full	full	ADJ
fuelectenerg-671	113	3	results	result	NOUN
fuelectenerg-671	113	4	can	can	AUX
fuelectenerg-671	113	5	be	be	AUX
fuelectenerg-671	113	6	viewed	view	VERB
fuelectenerg-671	113	7	in	in	ADP
fuelectenerg-671	113	8	table	table	NOUN
fuelectenerg-671	113	9	2	2	NUM
fuelectenerg-671	113	10	.	.	NOUN
fuelectenerg-671	113	11	5	5	NUM
fuelectenerg-671	113	12	.	.	X
fuelectenerg-671	113	13	conclusion	conclusion	NOUN
fuelectenerg-671	113	14	a	a	DET
fuelectenerg-671	113	15	numerical	numerical	ADJ
fuelectenerg-671	113	16	method	method	NOUN
fuelectenerg-671	113	17	for	for	ADP
fuelectenerg-671	113	18	determining	determine	VERB
fuelectenerg-671	113	19	specific	specific	ADJ
fuelectenerg-671	113	20	contact	contact	NOUN
fuelectenerg-671	113	21	resistivity	resistivity	NOUN
fuelectenerg-671	113	22	between	between	ADP
fuelectenerg-671	113	23	a	a	DET
fuelectenerg-671	113	24	metal	metal	NOUN
fuelectenerg-671	113	25	and	and	CCONJ
fuelectenerg-671	113	26	a	a	DET
fuelectenerg-671	113	27	semiconductor	semiconductor	NOUN
fuelectenerg-671	113	28	ohmic	ohmic	ADJ
fuelectenerg-671	113	29	contact	contact	NOUN
fuelectenerg-671	113	30	in	in	ADP
fuelectenerg-671	113	31	3	3	NUM
fuelectenerg-671	113	32	-	-	PUNCT
fuelectenerg-671	113	33	d	d	NOUN
fuelectenerg-671	113	34	circumstance	circumstance	NOUN
fuelectenerg-671	113	35	using	use	VERB
fuelectenerg-671	113	36	a	a	DET
fuelectenerg-671	113	37	two	two	NUM
fuelectenerg-671	113	38	-	-	PUNCT
fuelectenerg-671	113	39	contact	contact	NOUN
fuelectenerg-671	113	40	circular	circular	ADJ
fuelectenerg-671	113	41	test	test	NOUN
fuelectenerg-671	113	42	structure	structure	NOUN
fuelectenerg-671	113	43	was	be	AUX
fuelectenerg-671	113	44	presented	present	VERB
fuelectenerg-671	113	45	.	.	PUNCT
fuelectenerg-671	114	1	it	it	PRON
fuelectenerg-671	114	2	was	be	AUX
fuelectenerg-671	114	3	developed	develop	VERB
fuelectenerg-671	114	4	using	use	VERB
fuelectenerg-671	114	5	finite	finite	ADJ
fuelectenerg-671	114	6	element	element	NOUN
fuelectenerg-671	114	7	modeling	modeling	NOUN
fuelectenerg-671	114	8	program	program	NOUN
fuelectenerg-671	114	9	.	.	PUNCT
fuelectenerg-671	115	1	specific	specific	ADJ
fuelectenerg-671	115	2	contact	contact	NOUN
fuelectenerg-671	115	3	resistivity	resistivity	NOUN
fuelectenerg-671	115	4	for	for	ADP
fuelectenerg-671	115	5	as	as	ADV
fuelectenerg-671	115	6	-	-	PUNCT
fuelectenerg-671	115	7	deposited	deposit	VERB
fuelectenerg-671	115	8	ni	ni	NOUN
fuelectenerg-671	115	9	contacts	contact	NOUN
fuelectenerg-671	115	10	to	to	ADP
fuelectenerg-671	115	11	p	p	NOUN
fuelectenerg-671	115	12	-	-	PUNCT
fuelectenerg-671	115	13	type	type	NOUN
fuelectenerg-671	115	14	ge	ge	PROPN
fuelectenerg-671	115	15	substrates	substrate	NOUN
fuelectenerg-671	115	16	were	be	AUX
fuelectenerg-671	115	17	464	464	NUM
fuelectenerg-671	115	18	a.	a.	NOUN
fuelectenerg-671	115	19	m.	m.	NOUN
fuelectenerg-671	115	20	collins	collins	PROPN
fuelectenerg-671	115	21	,	,	PUNCT
fuelectenerg-671	115	22	y.	y.	PROPN
fuelectenerg-671	115	23	pan	pan	PROPN
fuelectenerg-671	115	24	,	,	PUNCT
fuelectenerg-671	115	25	a.	a.	PROPN
fuelectenerg-671	115	26	s.	s.	PROPN
fuelectenerg-671	115	27	holland	holland	PROPN
fuelectenerg-671	115	28	obtained	obtain	VERB
fuelectenerg-671	115	29	by	by	ADP
fuelectenerg-671	115	30	using	use	VERB
fuelectenerg-671	115	31	the	the	DET
fuelectenerg-671	115	32	proposed	propose	VERB
fuelectenerg-671	115	33	test	test	NOUN
fuelectenerg-671	115	34	structure	structure	NOUN
fuelectenerg-671	115	35	and	and	CCONJ
fuelectenerg-671	115	36	it	it	PRON
fuelectenerg-671	115	37	was	be	AUX
fuelectenerg-671	115	38	determined	determined	ADJ
fuelectenerg-671	115	39	to	to	PART
fuelectenerg-671	115	40	be	be	AUX
fuelectenerg-671	115	41	(	(	PUNCT
fuelectenerg-671	115	42	2.3	2.3	NUM
fuelectenerg-671	115	43	-	-	SYM
fuelectenerg-671	115	44	27	27	NUM
fuelectenerg-671	115	45	)	)	PUNCT
fuelectenerg-671	115	46	×	×	NOUN
fuelectenerg-671	115	47	10	10	NUM
fuelectenerg-671	116	1	-6	-6	NOUN
fuelectenerg-671	116	2	ω·cm	ω·cm	PRON
fuelectenerg-671	116	3	2	2	NUM
fuelectenerg-671	116	4	using	use	VERB
fuelectenerg-671	116	5	presented	present	VERB
fuelectenerg-671	116	6	method	method	NOUN
fuelectenerg-671	116	7	.	.	PUNCT
fuelectenerg-671	117	1	in	in	ADP
fuelectenerg-671	117	2	addition	addition	NOUN
fuelectenerg-671	117	3	the	the	DET
fuelectenerg-671	117	4	process	process	NOUN
fuelectenerg-671	117	5	was	be	AUX
fuelectenerg-671	117	6	conducted	conduct	VERB
fuelectenerg-671	117	7	a	a	DET
fuelectenerg-671	117	8	second	second	ADJ
fuelectenerg-671	117	9	time	time	NOUN
fuelectenerg-671	117	10	on	on	ADP
fuelectenerg-671	117	11	heat	heat	NOUN
fuelectenerg-671	117	12	treated	treat	VERB
fuelectenerg-671	117	13	ti	ti	NOUN
fuelectenerg-671	117	14	contacts	contact	NOUN
fuelectenerg-671	117	15	on	on	ADP
fuelectenerg-671	117	16	sic	sic	ADJ
fuelectenerg-671	117	17	to	to	PART
fuelectenerg-671	117	18	provide	provide	VERB
fuelectenerg-671	117	19	a	a	DET
fuelectenerg-671	117	20	second	second	ADJ
fuelectenerg-671	117	21	independent	independent	ADJ
fuelectenerg-671	117	22	set	set	NOUN
fuelectenerg-671	117	23	of	of	ADP
fuelectenerg-671	117	24	results	result	NOUN
fuelectenerg-671	117	25	.	.	PUNCT
fuelectenerg-671	118	1	the	the	DET
fuelectenerg-671	118	2	specific	specific	ADJ
fuelectenerg-671	118	3	contact	contact	NOUN
fuelectenerg-671	118	4	resistivity	resistivity	NOUN
fuelectenerg-671	118	5	was	be	AUX
fuelectenerg-671	118	6	determined	determine	VERB
fuelectenerg-671	118	7	to	to	PART
fuelectenerg-671	118	8	be	be	AUX
fuelectenerg-671	118	9	(	(	PUNCT
fuelectenerg-671	118	10	1.3	1.3	NUM
fuelectenerg-671	118	11	-	-	SYM
fuelectenerg-671	118	12	2.4	2.4	NUM
fuelectenerg-671	118	13	)	)	PUNCT
fuelectenerg-671	118	14	×10	×10	PROPN
fuelectenerg-671	118	15	-3	-3	PUNCT
fuelectenerg-671	118	16	ω·cm	ω·cm	PROPN
fuelectenerg-671	118	17	2	2	NUM
fuelectenerg-671	118	18	.	.	PUNCT
fuelectenerg-671	119	1	the	the	DET
fuelectenerg-671	119	2	results	result	NOUN
fuelectenerg-671	119	3	show	show	VERB
fuelectenerg-671	119	4	that	that	SCONJ
fuelectenerg-671	119	5	with	with	ADP
fuelectenerg-671	119	6	known	know	VERB
fuelectenerg-671	119	7	semiconductor	semiconductor	NOUN
fuelectenerg-671	119	8	substrate	substrate	NOUN
fuelectenerg-671	119	9	resistivity	resistivity	NOUN
fuelectenerg-671	119	10	ρb	ρb	X
fuelectenerg-671	119	11	and	and	CCONJ
fuelectenerg-671	119	12	a	a	DET
fuelectenerg-671	119	13	fixed	fixed	ADJ
fuelectenerg-671	119	14	geometry	geometry	NOUN
fuelectenerg-671	119	15	,	,	PUNCT
fuelectenerg-671	119	16	using	use	VERB
fuelectenerg-671	119	17	a	a	DET
fuelectenerg-671	119	18	scaling	scale	VERB
fuelectenerg-671	119	19	equation	equation	NOUN
fuelectenerg-671	119	20	,	,	PUNCT
fuelectenerg-671	119	21	ρc	ρc	VERB
fuelectenerg-671	119	22	can	can	AUX
fuelectenerg-671	119	23	be	be	AUX
fuelectenerg-671	119	24	determined	determine	VERB
fuelectenerg-671	119	25	conveniently	conveniently	ADV
fuelectenerg-671	119	26	by	by	ADP
fuelectenerg-671	119	27	picking	pick	VERB
fuelectenerg-671	119	28	up	up	ADP
fuelectenerg-671	119	29	data	data	NOUN
fuelectenerg-671	119	30	points	point	NOUN
fuelectenerg-671	119	31	from	from	ADP
fuelectenerg-671	119	32	the	the	DET
fuelectenerg-671	119	33	reported	report	VERB
fuelectenerg-671	119	34	figures	figure	NOUN
fuelectenerg-671	119	35	.	.	PUNCT
fuelectenerg-671	120	1	references	reference	NOUN
fuelectenerg-671	120	2	[	[	X
fuelectenerg-671	120	3	1	1	X
fuelectenerg-671	120	4	]	]	PUNCT
fuelectenerg-671	120	5	d.	d.	PROPN
fuelectenerg-671	120	6	k.	k.	PROPN
fuelectenerg-671	120	7	schroder	schroder	PROPN
fuelectenerg-671	120	8	,	,	PUNCT
fuelectenerg-671	120	9	semiconductor	semiconductor	NOUN
fuelectenerg-671	120	10	material	material	NOUN
fuelectenerg-671	120	11	and	and	CCONJ
fuelectenerg-671	120	12	device	device	NOUN
fuelectenerg-671	120	13	characterization	characterization	NOUN
fuelectenerg-671	120	14	,	,	PUNCT
fuelectenerg-671	120	15	3rd	3rd	ADJ
fuelectenerg-671	120	16	ed	ed	NOUN
fuelectenerg-671	120	17	.	.	PUNCT
fuelectenerg-671	121	1	hoboken	hoboken	PROPN
fuelectenerg-671	121	2	,	,	PUNCT
fuelectenerg-671	121	3	nj	nj	PROPN
fuelectenerg-671	121	4	:	:	PUNCT
fuelectenerg-671	121	5	wiley	wiley	PROPN
fuelectenerg-671	121	6	,	,	PUNCT
fuelectenerg-671	121	7	pp	pp	PROPN
fuelectenerg-671	121	8	.	.	PUNCT
fuelectenerg-671	122	1	135	135	NUM
fuelectenerg-671	122	2	-	-	SYM
fuelectenerg-671	122	3	157	157	NUM
fuelectenerg-671	122	4	,	,	PUNCT
fuelectenerg-671	122	5	2006	2006	NUM
fuelectenerg-671	122	6	.	.	PUNCT
fuelectenerg-671	123	1	[	[	X
fuelectenerg-671	123	2	2	2	X
fuelectenerg-671	123	3	]	]	PUNCT
fuelectenerg-671	123	4	g.	g.	PROPN
fuelectenerg-671	123	5	k.	k.	PROPN
fuelectenerg-671	123	6	reeves	reeves	PROPN
fuelectenerg-671	123	7	and	and	CCONJ
fuelectenerg-671	123	8	h.	h.	PROPN
fuelectenerg-671	123	9	b.	b.	PROPN
fuelectenerg-671	123	10	harrison	harrison	PROPN
fuelectenerg-671	123	11	,	,	PUNCT
fuelectenerg-671	123	12	"	"	PUNCT
fuelectenerg-671	123	13	obtaining	obtain	VERB
fuelectenerg-671	123	14	the	the	DET
fuelectenerg-671	123	15	specific	specific	ADJ
fuelectenerg-671	123	16	contact	contact	NOUN
fuelectenerg-671	123	17	resistance	resistance	NOUN
fuelectenerg-671	123	18	from	from	ADP
fuelectenerg-671	123	19	transmission	transmission	NOUN
fuelectenerg-671	123	20	line	line	NOUN
fuelectenerg-671	123	21	model	model	NOUN
fuelectenerg-671	123	22	measurements	measurement	NOUN
fuelectenerg-671	123	23	"	"	PUNCT
fuelectenerg-671	123	24	,	,	PUNCT
fuelectenerg-671	123	25	ieee	ieee	NOUN
fuelectenerg-671	123	26	electron	electron	NOUN
fuelectenerg-671	123	27	device	device	NOUN
fuelectenerg-671	123	28	lett	lett	PROPN
fuelectenerg-671	123	29	.	.	PUNCT
fuelectenerg-671	123	30	,	,	PUNCT
fuelectenerg-671	123	31	vol	vol	NOUN
fuelectenerg-671	123	32	.	.	PUNCT
fuelectenerg-671	123	33	edl-3	edl-3	NUM
fuelectenerg-671	123	34	,	,	PUNCT
fuelectenerg-671	123	35	no	no	INTJ
fuelectenerg-671	123	36	.	.	NOUN
fuelectenerg-671	123	37	5	5	NUM
fuelectenerg-671	123	38	,	,	PUNCT
fuelectenerg-671	123	39	pp	pp	ADJ
fuelectenerg-671	123	40	.	.	PUNCT
fuelectenerg-671	124	1	111–113	111–113	NUM
fuelectenerg-671	124	2	,	,	PUNCT
fuelectenerg-671	124	3	may	may	PROPN
fuelectenerg-671	124	4	1982	1982	NUM
fuelectenerg-671	124	5	.	.	PUNCT
fuelectenerg-671	125	1	[	[	X
fuelectenerg-671	125	2	3	3	X
fuelectenerg-671	125	3	]	]	PUNCT
fuelectenerg-671	125	4	s.	s.	PROPN
fuelectenerg-671	125	5	j.	j.	PROPN
fuelectenerg-671	125	6	proctor	proctor	PROPN
fuelectenerg-671	125	7	,	,	PUNCT
fuelectenerg-671	125	8	l.	l.	PROPN
fuelectenerg-671	125	9	w.	w.	PROPN
fuelectenerg-671	125	10	linholm	linholm	PROPN
fuelectenerg-671	125	11	,	,	PUNCT
fuelectenerg-671	125	12	and	and	CCONJ
fuelectenerg-671	125	13	j.	j.	PROPN
fuelectenerg-671	125	14	a.	a.	PROPN
fuelectenerg-671	125	15	mazer	mazer	PROPN
fuelectenerg-671	125	16	,	,	PUNCT
fuelectenerg-671	125	17	"	"	PUNCT
fuelectenerg-671	125	18	direct	direct	ADJ
fuelectenerg-671	125	19	measurements	measurement	NOUN
fuelectenerg-671	125	20	of	of	ADP
fuelectenerg-671	125	21	interfacial	interfacial	ADJ
fuelectenerg-671	125	22	contact	contact	NOUN
fuelectenerg-671	125	23	resistance	resistance	NOUN
fuelectenerg-671	125	24	,	,	PUNCT
fuelectenerg-671	125	25	end	end	VERB
fuelectenerg-671	125	26	contact	contact	NOUN
fuelectenerg-671	125	27	resistance	resistance	NOUN
fuelectenerg-671	125	28	,	,	PUNCT
fuelectenerg-671	125	29	and	and	CCONJ
fuelectenerg-671	125	30	interfacial	interfacial	ADJ
fuelectenerg-671	125	31	contact	contact	NOUN
fuelectenerg-671	125	32	layer	layer	NOUN
fuelectenerg-671	125	33	uniformity	uniformity	NOUN
fuelectenerg-671	125	34	"	"	PUNCT
fuelectenerg-671	125	35	,	,	PUNCT
fuelectenerg-671	125	36	ieee	ieee	PROPN
fuelectenerg-671	125	37	trans	trans	PROPN
fuelectenerg-671	125	38	.	.	PROPN
fuelectenerg-671	126	1	electron	electron	PROPN
fuelectenerg-671	126	2	devices	device	NOUN
fuelectenerg-671	126	3	,	,	PUNCT
fuelectenerg-671	126	4	vol	vol	NOUN
fuelectenerg-671	126	5	.	.	PUNCT
fuelectenerg-671	127	1	ed-30	ed-30	NUM
fuelectenerg-671	127	2	,	,	PUNCT
fuelectenerg-671	127	3	no	no	INTJ
fuelectenerg-671	127	4	.	.	NOUN
fuelectenerg-671	127	5	11	11	NUM
fuelectenerg-671	127	6	,	,	PUNCT
fuelectenerg-671	127	7	pp	pp	ADJ
fuelectenerg-671	127	8	.	.	PUNCT
fuelectenerg-671	128	1	1535–1542	1535–1542	NUM
fuelectenerg-671	128	2	,	,	PUNCT
fuelectenerg-671	128	3	november	november	PROPN
fuelectenerg-671	128	4	1983	1983	NUM
fuelectenerg-671	128	5	.	.	PUNCT
fuelectenerg-671	129	1	[	[	X
fuelectenerg-671	129	2	4	4	X
fuelectenerg-671	129	3	]	]	X
fuelectenerg-671	129	4	v.	v.	CCONJ
fuelectenerg-671	129	5	gudmundsson	gudmundsson	NOUN
fuelectenerg-671	129	6	,	,	PUNCT
fuelectenerg-671	129	7	p.	p.	NOUN
fuelectenerg-671	129	8	hellstrom	hellstrom	NOUN
fuelectenerg-671	129	9	,	,	PUNCT
fuelectenerg-671	129	10	and	and	CCONJ
fuelectenerg-671	129	11	m.	m.	NOUN
fuelectenerg-671	129	12	ostling	ostling	NOUN
fuelectenerg-671	129	13	,	,	PUNCT
fuelectenerg-671	129	14	"	"	PUNCT
fuelectenerg-671	129	15	error	error	NOUN
fuelectenerg-671	129	16	propagation	propagation	NOUN
fuelectenerg-671	129	17	in	in	ADP
fuelectenerg-671	129	18	contact	contact	NOUN
fuelectenerg-671	129	19	resistivity	resistivity	NOUN
fuelectenerg-671	129	20	extraction	extraction	NOUN
fuelectenerg-671	129	21	using	use	VERB
fuelectenerg-671	129	22	cross	cross	ADJ
fuelectenerg-671	129	23	-	-	ADJ
fuelectenerg-671	129	24	bridge	bridge	ADJ
fuelectenerg-671	129	25	kelvin	kelvin	PROPN
fuelectenerg-671	129	26	resistors	resistors	PROPN
fuelectenerg-671	129	27	"	"	PUNCT
fuelectenerg-671	129	28	,	,	PUNCT
fuelectenerg-671	129	29	ieee	ieee	PROPN
fuelectenerg-671	129	30	trans	trans	PROPN
fuelectenerg-671	129	31	.	.	PROPN
fuelectenerg-671	130	1	electron	electron	PROPN
fuelectenerg-671	130	2	devices	device	NOUN
fuelectenerg-671	130	3	,	,	PUNCT
fuelectenerg-671	130	4	vol	vol	NOUN
fuelectenerg-671	130	5	.	.	PROPN
fuelectenerg-671	131	1	59	59	NUM
fuelectenerg-671	131	2	,	,	PUNCT
fuelectenerg-671	131	3	no	no	INTJ
fuelectenerg-671	131	4	.	.	NOUN
fuelectenerg-671	131	5	6	6	NUM
fuelectenerg-671	131	6	,	,	PUNCT
fuelectenerg-671	131	7	pp	pp	ADJ
fuelectenerg-671	131	8	.	.	PUNCT
fuelectenerg-671	132	1	1585–1591	1585–1591	NUM
fuelectenerg-671	132	2	,	,	PUNCT
fuelectenerg-671	132	3	june	june	PROPN
fuelectenerg-671	132	4	2012	2012	NUM
fuelectenerg-671	132	5	.	.	PUNCT
fuelectenerg-671	133	1	[	[	X
fuelectenerg-671	133	2	5	5	X
fuelectenerg-671	133	3	]	]	PUNCT
fuelectenerg-671	133	4	k.	k.	PROPN
fuelectenerg-671	133	5	w.	w.	PROPN
fuelectenerg-671	133	6	j.	j.	PROPN
fuelectenerg-671	133	7	findlay	findlay	PROPN
fuelectenerg-671	133	8	,	,	PUNCT
fuelectenerg-671	133	9	w.	w.	PROPN
fuelectenerg-671	133	10	j.	j.	PROPN
fuelectenerg-671	133	11	c.	c.	PROPN
fuelectenerg-671	133	12	alexander	alexander	PROPN
fuelectenerg-671	133	13	,	,	PUNCT
fuelectenerg-671	133	14	and	and	CCONJ
fuelectenerg-671	133	15	a.	a.	PROPN
fuelectenerg-671	133	16	j.	j.	PROPN
fuelectenerg-671	133	17	walton	walton	PROPN
fuelectenerg-671	133	18	,	,	PUNCT
fuelectenerg-671	133	19	"	"	PUNCT
fuelectenerg-671	133	20	the	the	DET
fuelectenerg-671	133	21	effect	effect	NOUN
fuelectenerg-671	133	22	of	of	ADP
fuelectenerg-671	133	23	contact	contact	NOUN
fuelectenerg-671	133	24	geometry	geometry	NOUN
fuelectenerg-671	133	25	on	on	ADP
fuelectenerg-671	133	26	the	the	DET
fuelectenerg-671	133	27	value	value	NOUN
fuelectenerg-671	133	28	of	of	ADP
fuelectenerg-671	133	29	contact	contact	NOUN
fuelectenerg-671	133	30	resistivity	resistivity	NOUN
fuelectenerg-671	133	31	extracted	extract	VERB
fuelectenerg-671	133	32	from	from	ADP
fuelectenerg-671	133	33	kelvin	kelvin	PROPN
fuelectenerg-671	133	34	structures	structure	NOUN
fuelectenerg-671	133	35	"	"	PUNCT
fuelectenerg-671	133	36	,	,	PUNCT
fuelectenerg-671	133	37	in	in	ADP
fuelectenerg-671	133	38	proceedings	proceeding	NOUN
fuelectenerg-671	133	39	of	of	ADP
fuelectenerg-671	133	40	the	the	DET
fuelectenerg-671	133	41	ieee	ieee	NOUN
fuelectenerg-671	133	42	int	int	NOUN
fuelectenerg-671	133	43	.	.	PUNCT
fuelectenerg-671	134	1	conf	conf	PROPN
fuelectenerg-671	134	2	.	.	PUNCT
fuelectenerg-671	135	1	microelectron	microelectron	PROPN
fuelectenerg-671	135	2	.	.	PUNCT
fuelectenerg-671	136	1	test	test	NOUN
fuelectenerg-671	136	2	struct	struct	NOUN
fuelectenerg-671	136	3	.	.	PUNCT
fuelectenerg-671	136	4	,	,	PUNCT
fuelectenerg-671	136	5	march	march	PROPN
fuelectenerg-671	136	6	1989	1989	NUM
fuelectenerg-671	136	7	,	,	PUNCT
fuelectenerg-671	136	8	vol	vol	NOUN
fuelectenerg-671	136	9	.	.	PROPN
fuelectenerg-671	136	10	2	2	NUM
fuelectenerg-671	136	11	,	,	PUNCT
fuelectenerg-671	136	12	pp	pp	ADJ
fuelectenerg-671	136	13	.	.	PUNCT
fuelectenerg-671	137	1	133–138	133–138	NUM
fuelectenerg-671	137	2	.	.	PUNCT
fuelectenerg-671	138	1	[	[	X
fuelectenerg-671	138	2	6	6	NUM
fuelectenerg-671	138	3	]	]	PUNCT
fuelectenerg-671	138	4	d.	d.	PROPN
fuelectenerg-671	138	5	b.	b.	PROPN
fuelectenerg-671	138	6	scott	scott	PROPN
fuelectenerg-671	138	7	,	,	PUNCT
fuelectenerg-671	138	8	r.	r.	PROPN
fuelectenerg-671	138	9	a.	a.	PROPN
fuelectenerg-671	138	10	chapman	chapman	PROPN
fuelectenerg-671	138	11	,	,	PUNCT
fuelectenerg-671	138	12	c.-c	c.-c	PROPN
fuelectenerg-671	138	13	.	.	PUNCT
fuelectenerg-671	139	1	wei	wei	PROPN
fuelectenerg-671	139	2	,	,	PUNCT
fuelectenerg-671	139	3	s.	s.	PROPN
fuelectenerg-671	139	4	s.	s.	PROPN
fuelectenerg-671	139	5	mahant	mahant	PROPN
fuelectenerg-671	139	6	-	-	PUNCT
fuelectenerg-671	139	7	shetti	shetti	PROPN
fuelectenerg-671	139	8	,	,	PUNCT
fuelectenerg-671	139	9	r.	r.	PROPN
fuelectenerg-671	139	10	a.	a.	PROPN
fuelectenerg-671	139	11	haken	haken	PROPN
fuelectenerg-671	139	12	,	,	PUNCT
fuelectenerg-671	139	13	and	and	CCONJ
fuelectenerg-671	139	14	t.	t.	PROPN
fuelectenerg-671	139	15	c.	c.	PROPN
fuelectenerg-671	139	16	holloway	holloway	PROPN
fuelectenerg-671	139	17	,	,	PUNCT
fuelectenerg-671	139	18	"	"	PUNCT
fuelectenerg-671	139	19	titanium	titanium	NOUN
fuelectenerg-671	139	20	disilicide	disilicide	NOUN
fuelectenerg-671	139	21	contact	contact	NOUN
fuelectenerg-671	139	22	resistivity	resistivity	NOUN
fuelectenerg-671	139	23	and	and	CCONJ
fuelectenerg-671	139	24	its	its	PRON
fuelectenerg-671	139	25	impact	impact	NOUN
fuelectenerg-671	139	26	on	on	ADP
fuelectenerg-671	139	27	1	1	NUM
fuelectenerg-671	139	28	-	-	PUNCT
fuelectenerg-671	139	29	μm	μm	NUM
fuelectenerg-671	139	30	cmos	cmos	NOUN
fuelectenerg-671	139	31	circuit	circuit	NOUN
fuelectenerg-671	139	32	performance	performance	NOUN
fuelectenerg-671	139	33	"	"	PUNCT
fuelectenerg-671	139	34	,	,	PUNCT
fuelectenerg-671	139	35	ieee	ieee	PROPN
fuelectenerg-671	139	36	trans	trans	PROPN
fuelectenerg-671	139	37	.	.	PROPN
fuelectenerg-671	139	38	electron	electron	PROPN
fuelectenerg-671	139	39	devices	device	NOUN
fuelectenerg-671	139	40	,	,	PUNCT
fuelectenerg-671	139	41	vol	vol	NOUN
fuelectenerg-671	139	42	.	.	PUNCT
fuelectenerg-671	140	1	ed-34	ed-34	NUM
fuelectenerg-671	140	2	,	,	PUNCT
fuelectenerg-671	140	3	no	no	INTJ
fuelectenerg-671	140	4	.	.	NOUN
fuelectenerg-671	140	5	3	3	NUM
fuelectenerg-671	140	6	,	,	PUNCT
fuelectenerg-671	140	7	pp	pp	ADJ
fuelectenerg-671	140	8	.	.	PUNCT
fuelectenerg-671	141	1	562–574	562–574	NUM
fuelectenerg-671	141	2	,	,	PUNCT
fuelectenerg-671	141	3	march	march	PROPN
fuelectenerg-671	141	4	1987	1987	NUM
fuelectenerg-671	141	5	.	.	PUNCT
fuelectenerg-671	142	1	[	[	X
fuelectenerg-671	142	2	7	7	X
fuelectenerg-671	142	3	]	]	X
fuelectenerg-671	142	4	g.	g.	PROPN
fuelectenerg-671	142	5	k.	k.	PROPN
fuelectenerg-671	142	6	reeves	reeves	PROPN
fuelectenerg-671	142	7	,	,	PUNCT
fuelectenerg-671	142	8	"	"	PUNCT
fuelectenerg-671	142	9	specific	specific	ADJ
fuelectenerg-671	142	10	contact	contact	NOUN
fuelectenerg-671	142	11	resistivity	resistivity	NOUN
fuelectenerg-671	142	12	using	use	VERB
fuelectenerg-671	142	13	a	a	DET
fuelectenerg-671	142	14	circular	circular	ADJ
fuelectenerg-671	142	15	transmission	transmission	NOUN
fuelectenerg-671	142	16	line	line	NOUN
fuelectenerg-671	142	17	model	model	NOUN
fuelectenerg-671	142	18	"	"	PUNCT
fuelectenerg-671	142	19	,	,	PUNCT
fuelectenerg-671	142	20	solid	solid	ADJ
fuelectenerg-671	142	21	state	state	NOUN
fuelectenerg-671	142	22	electron	electron	NOUN
fuelectenerg-671	142	23	,	,	PUNCT
fuelectenerg-671	142	24	vol	vol	NOUN
fuelectenerg-671	142	25	.	.	PROPN
fuelectenerg-671	143	1	23	23	NUM
fuelectenerg-671	143	2	,	,	PUNCT
fuelectenerg-671	143	3	no	no	INTJ
fuelectenerg-671	143	4	.	.	NOUN
fuelectenerg-671	143	5	5	5	NUM
fuelectenerg-671	143	6	,	,	PUNCT
fuelectenerg-671	143	7	pp	pp	ADJ
fuelectenerg-671	143	8	.	.	PUNCT
fuelectenerg-671	144	1	487	487	NUM
fuelectenerg-671	144	2	-	-	SYM
fuelectenerg-671	144	3	490	490	NUM
fuelectenerg-671	144	4	,	,	PUNCT
fuelectenerg-671	144	5	may	may	PROPN
fuelectenerg-671	144	6	1980	1980	NUM
fuelectenerg-671	144	7	.	.	PUNCT
fuelectenerg-671	145	1	[	[	X
fuelectenerg-671	145	2	8	8	NUM
fuelectenerg-671	145	3	]	]	PUNCT
fuelectenerg-671	145	4	a.	a.	PROPN
fuelectenerg-671	145	5	s.	s.	PROPN
fuelectenerg-671	145	6	holland	holland	PROPN
fuelectenerg-671	145	7	,	,	PUNCT
fuelectenerg-671	145	8	g.	g.	PROPN
fuelectenerg-671	145	9	k.	k.	PROPN
fuelectenerg-671	145	10	reeves	reeves	PROPN
fuelectenerg-671	145	11	,	,	PUNCT
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fuelectenerg-671	145	13	w.	w.	NOUN
fuelectenerg-671	145	14	leech	leech	NOUN
fuelectenerg-671	145	15	,	,	PUNCT
fuelectenerg-671	145	16	"	"	PUNCT
fuelectenerg-671	145	17	universal	universal	ADJ
fuelectenerg-671	145	18	error	error	NOUN
fuelectenerg-671	145	19	corrections	correction	NOUN
fuelectenerg-671	145	20	for	for	ADP
fuelectenerg-671	145	21	finite	finite	ADJ
fuelectenerg-671	145	22	semiconductor	semiconductor	NOUN
fuelectenerg-671	145	23	resistivity	resistivity	NOUN
fuelectenerg-671	145	24	in	in	ADP
fuelectenerg-671	145	25	cross	cross	ADJ
fuelectenerg-671	145	26	-	-	ADJ
fuelectenerg-671	145	27	kelvin	kelvin	ADJ
fuelectenerg-671	145	28	resistor	resistor	NOUN
fuelectenerg-671	145	29	test	test	NOUN
fuelectenerg-671	145	30	structures	structure	NOUN
fuelectenerg-671	145	31	"	"	PUNCT
fuelectenerg-671	145	32	,	,	PUNCT
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fuelectenerg-671	145	34	trans	trans	PROPN
fuelectenerg-671	145	35	.	.	PROPN
fuelectenerg-671	146	1	electron	electron	PROPN
fuelectenerg-671	146	2	devices	device	NOUN
fuelectenerg-671	146	3	,	,	PUNCT
fuelectenerg-671	146	4	vol	vol	NOUN
fuelectenerg-671	146	5	.	.	PROPN
fuelectenerg-671	147	1	51	51	NUM
fuelectenerg-671	147	2	,	,	PUNCT
fuelectenerg-671	147	3	no	no	INTJ
fuelectenerg-671	147	4	.	.	NOUN
fuelectenerg-671	147	5	6	6	NUM
fuelectenerg-671	147	6	,	,	PUNCT
fuelectenerg-671	147	7	pp	pp	ADJ
fuelectenerg-671	147	8	.	.	PUNCT
fuelectenerg-671	148	1	914	914	NUM
fuelectenerg-671	148	2	-	-	SYM
fuelectenerg-671	148	3	919	919	NUM
fuelectenerg-671	148	4	,	,	PUNCT
fuelectenerg-671	148	5	june	june	PROPN
fuelectenerg-671	148	6	2004	2004	NUM
fuelectenerg-671	148	7	.	.	PUNCT
fuelectenerg-671	149	1	[	[	X
fuelectenerg-671	149	2	9	9	NUM
fuelectenerg-671	149	3	]	]	X
fuelectenerg-671	149	4	y.	y.	PROPN
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fuelectenerg-671	149	6	,	,	PUNCT
fuelectenerg-671	149	7	g.	g.	PROPN
fuelectenerg-671	149	8	k.	k.	PROPN
fuelectenerg-671	149	9	reeves	reeves	PROPN
fuelectenerg-671	149	10	,	,	PUNCT
fuelectenerg-671	149	11	p.	p.	NOUN
fuelectenerg-671	149	12	w.	w.	PROPN
fuelectenerg-671	149	13	leech	leech	PROPN
fuelectenerg-671	149	14	and	and	CCONJ
fuelectenerg-671	149	15	a.	a.	NOUN
fuelectenerg-671	149	16	s.	s.	PROPN
fuelectenerg-671	149	17	holland	holland	PROPN
fuelectenerg-671	149	18	,	,	PUNCT
fuelectenerg-671	149	19	"	"	PUNCT
fuelectenerg-671	149	20	analytical	analytical	ADJ
fuelectenerg-671	149	21	and	and	CCONJ
fuelectenerg-671	149	22	finite	finite	ADJ
fuelectenerg-671	149	23	-	-	ADJ
fuelectenerg-671	149	24	element	element	ADJ
fuelectenerg-671	149	25	modeling	modeling	NOUN
fuelectenerg-671	149	26	of	of	ADP
fuelectenerg-671	149	27	a	a	DET
fuelectenerg-671	149	28	two	two	NUM
fuelectenerg-671	149	29	-	-	PUNCT
fuelectenerg-671	149	30	contact	contact	NOUN
fuelectenerg-671	149	31	circular	circular	ADJ
fuelectenerg-671	149	32	test	test	NOUN
fuelectenerg-671	149	33	structure	structure	NOUN
fuelectenerg-671	149	34	for	for	ADP
fuelectenerg-671	149	35	specific	specific	ADJ
fuelectenerg-671	149	36	contact	contact	NOUN
fuelectenerg-671	149	37	resistivity	resistivity	NOUN
fuelectenerg-671	149	38	"	"	PUNCT
fuelectenerg-671	149	39	,	,	PUNCT
fuelectenerg-671	149	40	ieee	ieee	PROPN
fuelectenerg-671	149	41	trans	trans	PROPN
fuelectenerg-671	149	42	.	.	PROPN
fuelectenerg-671	149	43	electron	electron	PROPN
fuelectenerg-671	149	44	devices	device	NOUN
fuelectenerg-671	149	45	,	,	PUNCT
fuelectenerg-671	149	46	vol	vol	NOUN
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fuelectenerg-671	149	50	pp	pp	ADJ
fuelectenerg-671	149	51	.	.	PUNCT
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fuelectenerg-671	150	2	-	-	SYM
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fuelectenerg-671	150	4	,	,	PUNCT
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fuelectenerg-671	150	7	.	.	PUNCT
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fuelectenerg-671	151	5	h.	h.	PROPN
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fuelectenerg-671	151	7	,	,	PUNCT
fuelectenerg-671	151	8	"	"	PUNCT
fuelectenerg-671	151	9	models	model	NOUN
fuelectenerg-671	151	10	for	for	ADP
fuelectenerg-671	151	11	contacts	contact	NOUN
fuelectenerg-671	151	12	to	to	PART
fuelectenerg-671	151	13	planar	planar	ADJ
fuelectenerg-671	151	14	devices	device	NOUN
fuelectenerg-671	151	15	"	"	PUNCT
fuelectenerg-671	151	16	,	,	PUNCT
fuelectenerg-671	151	17	solid	solid	ADJ
fuelectenerg-671	151	18	state	state	NOUN
fuelectenerg-671	151	19	electron	electron	NOUN
fuelectenerg-671	151	20	,	,	PUNCT
fuelectenerg-671	151	21	vol	vol	NOUN
fuelectenerg-671	151	22	.	.	PROPN
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fuelectenerg-671	151	24	,	,	PUNCT
fuelectenerg-671	151	25	no	no	INTJ
fuelectenerg-671	151	26	.	.	NOUN
fuelectenerg-671	151	27	2	2	NUM
fuelectenerg-671	151	28	,	,	PUNCT
fuelectenerg-671	151	29	pp	pp	ADJ
fuelectenerg-671	151	30	.	.	PUNCT
fuelectenerg-671	152	1	145	145	NUM
fuelectenerg-671	152	2	-	-	SYM
fuelectenerg-671	152	3	158	158	NUM
fuelectenerg-671	152	4	,	,	PUNCT
fuelectenerg-671	152	5	february	february	PROPN
fuelectenerg-671	152	6	1972	1972	NUM
fuelectenerg-671	152	7	.	.	PUNCT
fuelectenerg-671	153	1	[	[	X
fuelectenerg-671	153	2	11	11	NUM
fuelectenerg-671	153	3	]	]	X
fuelectenerg-671	153	4	y.	y.	PROPN
fuelectenerg-671	153	5	pan	pan	PROPN
fuelectenerg-671	153	6	,	,	PUNCT
fuelectenerg-671	153	7	a.	a.	PROPN
fuelectenerg-671	153	8	m.	m.	PROPN
fuelectenerg-671	153	9	collins	collins	PROPN
fuelectenerg-671	153	10	and	and	CCONJ
fuelectenerg-671	153	11	a.	a.	PROPN
fuelectenerg-671	153	12	s.	s.	PROPN
fuelectenerg-671	153	13	holland	holland	PROPN
fuelectenerg-671	153	14	,	,	PUNCT
fuelectenerg-671	153	15	"	"	PUNCT
fuelectenerg-671	153	16	determining	determine	VERB
fuelectenerg-671	153	17	specific	specific	ADJ
fuelectenerg-671	153	18	contact	contact	NOUN
fuelectenerg-671	153	19	resistivity	resistivity	NOUN
fuelectenerg-671	153	20	to	to	ADP
fuelectenerg-671	153	21	bulk	bulk	ADJ
fuelectenerg-671	153	22	semiconductor	semiconductor	NOUN
fuelectenerg-671	153	23	using	use	VERB
fuelectenerg-671	153	24	a	a	DET
fuelectenerg-671	153	25	two	two	NUM
fuelectenerg-671	153	26	-	-	PUNCT
fuelectenerg-671	153	27	contact	contact	NOUN
fuelectenerg-671	153	28	circular	circular	ADJ
fuelectenerg-671	153	29	test	test	NOUN
fuelectenerg-671	153	30	structure	structure	NOUN
fuelectenerg-671	153	31	"	"	PUNCT
fuelectenerg-671	153	32	,	,	PUNCT
fuelectenerg-671	153	33	in	in	ADP
fuelectenerg-671	153	34	proceedings	proceeding	NOUN
fuelectenerg-671	153	35	of	of	ADP
fuelectenerg-671	153	36	the	the	DET
fuelectenerg-671	153	37	ieee	ieee	NOUN
fuelectenerg-671	153	38	international	international	PROPN
fuelectenerg-671	153	39	conference	conference	NOUN
fuelectenerg-671	153	40	on	on	ADP
fuelectenerg-671	153	41	miel	miel	PROPN
fuelectenerg-671	153	42	,	,	PUNCT
fuelectenerg-671	153	43	may	may	AUX
fuelectenerg-671	153	44	2014	2014	NUM
fuelectenerg-671	153	45	,	,	PUNCT
fuelectenerg-671	153	46	pp	pp	ADV
fuelectenerg-671	153	47	.	.	PUNCT
fuelectenerg-671	154	1	257	257	NUM
fuelectenerg-671	154	2	-	-	SYM
fuelectenerg-671	154	3	260	260	NUM
fuelectenerg-671	154	4	.	.	PUNCT