id	sid	tid	token	lemma	pos
fuelectenerg-7534	1	1	facta	facta	PROPN
fuelectenerg-7534	1	2	universitatis	universitatis	PROPN
fuelectenerg-7534	1	3	series	series	NOUN
fuelectenerg-7534	1	4	:	:	PUNCT
fuelectenerg-7534	1	5	electronics	electronic	NOUN
fuelectenerg-7534	1	6	and	and	CCONJ
fuelectenerg-7534	1	7	energetics	energetics	NOUN
fuelectenerg-7534	1	8	vol	vol	NOUN
fuelectenerg-7534	1	9	.	.	PUNCT
fuelectenerg-7534	2	1	34	34	NUM
fuelectenerg-7534	2	2	,	,	PUNCT
fuelectenerg-7534	2	3	no	no	DET
fuelectenerg-7534	2	4	3	3	NUM
fuelectenerg-7534	2	5	,	,	PUNCT
fuelectenerg-7534	2	6	september	september	PROPN
fuelectenerg-7534	2	7	2021	2021	NUM
fuelectenerg-7534	2	8	,	,	PUNCT
fuelectenerg-7534	2	9	pp	pp	ADV
fuelectenerg-7534	2	10	.	.	PUNCT
fuelectenerg-7534	3	1	333	333	NUM
fuelectenerg-7534	3	2	-	-	SYM
fuelectenerg-7534	3	3	366	366	NUM
fuelectenerg-7534	3	4	https://doi.org/10.2298/fuee2103333	https://doi.org/10.2298/fuee2103333	NOUN
fuelectenerg-7534	3	5	t	t	NOUN
fuelectenerg-7534	3	6	©	©	PROPN
fuelectenerg-7534	3	7	2021	2021	NUM
fuelectenerg-7534	3	8	by	by	ADP
fuelectenerg-7534	3	9	university	university	PROPN
fuelectenerg-7534	3	10	of	of	ADP
fuelectenerg-7534	3	11	niš	niš	PROPN
fuelectenerg-7534	3	12	,	,	PUNCT
fuelectenerg-7534	3	13	serbia	serbia	PROPN
fuelectenerg-7534	3	14	|	|	ADV
fuelectenerg-7534	3	15	creative	creative	ADJ
fuelectenerg-7534	3	16	commons	common	NOUN
fuelectenerg-7534	3	17	license	license	NOUN
fuelectenerg-7534	3	18	:	:	PUNCT
fuelectenerg-7534	3	19	cc	cc	VERB
fuelectenerg-7534	3	20	by	by	ADP
fuelectenerg-7534	3	21	-	-	PUNCT
fuelectenerg-7534	3	22	nc	nc	VERB
fuelectenerg-7534	3	23	-	-	PUNCT
fuelectenerg-7534	3	24	nd	nd	ADV
fuelectenerg-7534	3	25	original	original	ADJ
fuelectenerg-7534	3	26	scientific	scientific	ADJ
fuelectenerg-7534	3	27	paper	paper	NOUN
fuelectenerg-7534	3	28	a	a	DET
fuelectenerg-7534	3	29	comprehensive	comprehensive	ADJ
fuelectenerg-7534	3	30	overview	overview	NOUN
fuelectenerg-7534	3	31	of	of	ADP
fuelectenerg-7534	3	32	recent	recent	ADJ
fuelectenerg-7534	3	33	developments	development	NOUN
fuelectenerg-7534	3	34	in	in	ADP
fuelectenerg-7534	3	35	rf	rf	ADJ
fuelectenerg-7534	3	36	-	-	PUNCT
fuelectenerg-7534	3	37	mems	mems	NOUN
fuelectenerg-7534	3	38	technology	technology	NOUN
fuelectenerg-7534	3	39	-	-	PUNCT
fuelectenerg-7534	3	40	based	base	VERB
fuelectenerg-7534	3	41	high	high	ADJ
fuelectenerg-7534	3	42	-	-	PUNCT
fuelectenerg-7534	3	43	performance	performance	NOUN
fuelectenerg-7534	3	44	passive	passive	ADJ
fuelectenerg-7534	3	45	components	component	NOUN
fuelectenerg-7534	3	46	for	for	ADP
fuelectenerg-7534	3	47	applications	application	NOUN
fuelectenerg-7534	3	48	in	in	ADP
fuelectenerg-7534	3	49	the	the	DET
fuelectenerg-7534	3	50	5	5	NUM
fuelectenerg-7534	3	51	g	g	NOUN
fuelectenerg-7534	3	52	and	and	CCONJ
fuelectenerg-7534	3	53	future	future	ADJ
fuelectenerg-7534	3	54	telecommunications	telecommunication	NOUN
fuelectenerg-7534	3	55	scenarios	scenario	NOUN
fuelectenerg-7534	3	56	*	*	PUNCT
fuelectenerg-7534	3	57	girolamo	girolamo	PROPN
fuelectenerg-7534	3	58	tagliapietra	tagliapietra	NOUN
fuelectenerg-7534	3	59	,	,	PUNCT
fuelectenerg-7534	3	60	jacopo	jacopo	PROPN
fuelectenerg-7534	3	61	iannacci	iannacci	PROPN
fuelectenerg-7534	3	62	center	center	PROPN
fuelectenerg-7534	3	63	for	for	ADP
fuelectenerg-7534	3	64	sensors	sensor	NOUN
fuelectenerg-7534	3	65	and	and	CCONJ
fuelectenerg-7534	3	66	devices	device	NOUN
fuelectenerg-7534	3	67	(	(	PUNCT
fuelectenerg-7534	3	68	sd	sd	NOUN
fuelectenerg-7534	3	69	)	)	PUNCT
fuelectenerg-7534	3	70	fondazione	fondazione	NOUN
fuelectenerg-7534	3	71	bruno	bruno	PROPN
fuelectenerg-7534	3	72	kessler	kessler	PROPN
fuelectenerg-7534	3	73	(	(	PUNCT
fuelectenerg-7534	3	74	fbk	fbk	PROPN
fuelectenerg-7534	3	75	)	)	PUNCT
fuelectenerg-7534	3	76	,	,	PUNCT
fuelectenerg-7534	3	77	trento-38123	trento-38123	NOUN
fuelectenerg-7534	3	78	,	,	PUNCT
fuelectenerg-7534	3	79	italy	italy	PROPN
fuelectenerg-7534	3	80	abstract	abstract	NOUN
fuelectenerg-7534	3	81	.	.	PUNCT
fuelectenerg-7534	4	1	the	the	DET
fuelectenerg-7534	4	2	goal	goal	NOUN
fuelectenerg-7534	4	3	of	of	ADP
fuelectenerg-7534	4	4	this	this	DET
fuelectenerg-7534	4	5	work	work	NOUN
fuelectenerg-7534	4	6	is	be	AUX
fuelectenerg-7534	4	7	to	to	PART
fuelectenerg-7534	4	8	provide	provide	VERB
fuelectenerg-7534	4	9	an	an	DET
fuelectenerg-7534	4	10	overview	overview	NOUN
fuelectenerg-7534	4	11	about	about	ADP
fuelectenerg-7534	4	12	the	the	DET
fuelectenerg-7534	4	13	current	current	ADJ
fuelectenerg-7534	4	14	development	development	NOUN
fuelectenerg-7534	4	15	of	of	ADP
fuelectenerg-7534	4	16	radio	radio	NOUN
fuelectenerg-7534	4	17	-	-	PUNCT
fuelectenerg-7534	4	18	frequency	frequency	NOUN
fuelectenerg-7534	4	19	microelectromechanical	microelectromechanical	ADJ
fuelectenerg-7534	4	20	systems	system	NOUN
fuelectenerg-7534	4	21	technology	technology	NOUN
fuelectenerg-7534	4	22	,	,	PUNCT
fuelectenerg-7534	4	23	with	with	ADP
fuelectenerg-7534	4	24	special	special	ADJ
fuelectenerg-7534	4	25	attention	attention	NOUN
fuelectenerg-7534	4	26	towards	towards	ADP
fuelectenerg-7534	4	27	those	those	DET
fuelectenerg-7534	4	28	passive	passive	ADJ
fuelectenerg-7534	4	29	components	component	NOUN
fuelectenerg-7534	4	30	bearing	bear	VERB
fuelectenerg-7534	4	31	significant	significant	ADJ
fuelectenerg-7534	4	32	application	application	NOUN
fuelectenerg-7534	4	33	potential	potential	NOUN
fuelectenerg-7534	4	34	in	in	ADP
fuelectenerg-7534	4	35	the	the	DET
fuelectenerg-7534	4	36	currently	currently	ADV
fuelectenerg-7534	4	37	developing	develop	VERB
fuelectenerg-7534	4	38	5	5	NUM
fuelectenerg-7534	4	39	g	g	NOUN
fuelectenerg-7534	4	40	paradigm	paradigm	NOUN
fuelectenerg-7534	4	41	.	.	PUNCT
fuelectenerg-7534	5	1	due	due	ADP
fuelectenerg-7534	5	2	to	to	ADP
fuelectenerg-7534	5	3	the	the	DET
fuelectenerg-7534	5	4	required	require	VERB
fuelectenerg-7534	5	5	capabilities	capability	NOUN
fuelectenerg-7534	5	6	of	of	ADP
fuelectenerg-7534	5	7	such	such	ADJ
fuelectenerg-7534	5	8	communication	communication	NOUN
fuelectenerg-7534	5	9	standard	standard	NOUN
fuelectenerg-7534	5	10	in	in	ADP
fuelectenerg-7534	5	11	terms	term	NOUN
fuelectenerg-7534	5	12	of	of	ADP
fuelectenerg-7534	5	13	high	high	ADJ
fuelectenerg-7534	5	14	data	datum	NOUN
fuelectenerg-7534	5	15	rates	rate	NOUN
fuelectenerg-7534	5	16	,	,	PUNCT
fuelectenerg-7534	5	17	extended	extend	VERB
fuelectenerg-7534	5	18	allocated	allocate	VERB
fuelectenerg-7534	5	19	spectrum	spectrum	NOUN
fuelectenerg-7534	5	20	,	,	PUNCT
fuelectenerg-7534	5	21	use	use	NOUN
fuelectenerg-7534	5	22	of	of	ADP
fuelectenerg-7534	5	23	massive	massive	ADJ
fuelectenerg-7534	5	24	mimo	mimo	PROPN
fuelectenerg-7534	5	25	(	(	PUNCT
fuelectenerg-7534	5	26	multipleinput	multipleinput	NOUN
fuelectenerg-7534	5	27	-	-	PUNCT
fuelectenerg-7534	5	28	multiple	multiple	ADJ
fuelectenerg-7534	5	29	-	-	PUNCT
fuelectenerg-7534	5	30	output	output	NOUN
fuelectenerg-7534	5	31	)	)	PUNCT
fuelectenerg-7534	5	32	systems	system	NOUN
fuelectenerg-7534	5	33	,	,	PUNCT
fuelectenerg-7534	5	34	beam	beam	NOUN
fuelectenerg-7534	5	35	steering	steering	NOUN
fuelectenerg-7534	5	36	and	and	CCONJ
fuelectenerg-7534	5	37	beam	beam	NOUN
fuelectenerg-7534	5	38	forming	form	VERB
fuelectenerg-7534	5	39	,	,	PUNCT
fuelectenerg-7534	5	40	the	the	DET
fuelectenerg-7534	5	41	focus	focus	NOUN
fuelectenerg-7534	5	42	will	will	AUX
fuelectenerg-7534	5	43	be	be	AUX
fuelectenerg-7534	5	44	on	on	ADP
fuelectenerg-7534	5	45	devices	device	NOUN
fuelectenerg-7534	5	46	like	like	ADP
fuelectenerg-7534	5	47	switches	switch	NOUN
fuelectenerg-7534	5	48	,	,	PUNCT
fuelectenerg-7534	5	49	phase	phase	NOUN
fuelectenerg-7534	5	50	shifters	shifter	NOUN
fuelectenerg-7534	5	51	,	,	PUNCT
fuelectenerg-7534	5	52	attenuators	attenuator	NOUN
fuelectenerg-7534	5	53	,	,	PUNCT
fuelectenerg-7534	5	54	filters	filter	NOUN
fuelectenerg-7534	5	55	,	,	PUNCT
fuelectenerg-7534	5	56	and	and	CCONJ
fuelectenerg-7534	5	57	their	their	PRON
fuelectenerg-7534	5	58	packaging	packaging	NOUN
fuelectenerg-7534	5	59	/	/	SYM
fuelectenerg-7534	5	60	integration	integration	NOUN
fuelectenerg-7534	5	61	.	.	PUNCT
fuelectenerg-7534	6	1	for	for	ADP
fuelectenerg-7534	6	2	each	each	PRON
fuelectenerg-7534	6	3	of	of	ADP
fuelectenerg-7534	6	4	the	the	DET
fuelectenerg-7534	6	5	previous	previous	ADJ
fuelectenerg-7534	6	6	topics	topic	NOUN
fuelectenerg-7534	6	7	,	,	PUNCT
fuelectenerg-7534	6	8	several	several	ADJ
fuelectenerg-7534	6	9	valuable	valuable	ADJ
fuelectenerg-7534	6	10	contributions	contribution	NOUN
fuelectenerg-7534	6	11	appeared	appear	VERB
fuelectenerg-7534	6	12	in	in	ADP
fuelectenerg-7534	6	13	the	the	DET
fuelectenerg-7534	6	14	last	last	ADJ
fuelectenerg-7534	6	15	decade	decade	NOUN
fuelectenerg-7534	6	16	,	,	PUNCT
fuelectenerg-7534	6	17	underlining	underline	VERB
fuelectenerg-7534	6	18	the	the	DET
fuelectenerg-7534	6	19	improvements	improvement	NOUN
fuelectenerg-7534	6	20	produced	produce	VERB
fuelectenerg-7534	6	21	in	in	ADP
fuelectenerg-7534	6	22	the	the	DET
fuelectenerg-7534	6	23	state	state	NOUN
fuelectenerg-7534	6	24	of	of	ADP
fuelectenerg-7534	6	25	the	the	DET
fuelectenerg-7534	6	26	art	art	NOUN
fuelectenerg-7534	6	27	and	and	CCONJ
fuelectenerg-7534	6	28	the	the	DET
fuelectenerg-7534	6	29	chance	chance	NOUN
fuelectenerg-7534	6	30	for	for	SCONJ
fuelectenerg-7534	6	31	rfmems	rfmem	NOUN
fuelectenerg-7534	6	32	technology	technology	NOUN
fuelectenerg-7534	6	33	to	to	PART
fuelectenerg-7534	6	34	play	play	VERB
fuelectenerg-7534	6	35	a	a	DET
fuelectenerg-7534	6	36	prominent	prominent	ADJ
fuelectenerg-7534	6	37	role	role	NOUN
fuelectenerg-7534	6	38	in	in	ADP
fuelectenerg-7534	6	39	the	the	DET
fuelectenerg-7534	6	40	actual	actual	ADJ
fuelectenerg-7534	6	41	implementation	implementation	NOUN
fuelectenerg-7534	6	42	of	of	ADP
fuelectenerg-7534	6	43	the	the	DET
fuelectenerg-7534	6	44	5	5	NUM
fuelectenerg-7534	6	45	g	g	PROPN
fuelectenerg-7534	6	46	infrastructure	infrastructure	NOUN
fuelectenerg-7534	6	47	.	.	PUNCT
fuelectenerg-7534	7	1	key	key	ADJ
fuelectenerg-7534	7	2	words	word	NOUN
fuelectenerg-7534	7	3	:	:	PUNCT
fuelectenerg-7534	7	4	rf	rf	NOUN
fuelectenerg-7534	7	5	-	-	PUNCT
fuelectenerg-7534	7	6	mems	mem	NOUN
fuelectenerg-7534	7	7	,	,	PUNCT
fuelectenerg-7534	7	8	switches	switch	NOUN
fuelectenerg-7534	7	9	,	,	PUNCT
fuelectenerg-7534	7	10	packaging	packaging	NOUN
fuelectenerg-7534	7	11	,	,	PUNCT
fuelectenerg-7534	7	12	phase	phase	NOUN
fuelectenerg-7534	7	13	shifters	shifter	NOUN
fuelectenerg-7534	7	14	,	,	PUNCT
fuelectenerg-7534	7	15	attenuators	attenuator	NOUN
fuelectenerg-7534	7	16	,	,	PUNCT
fuelectenerg-7534	7	17	filters	filter	VERB
fuelectenerg-7534	7	18	1	1	NUM
fuelectenerg-7534	7	19	.	.	PUNCT
fuelectenerg-7534	8	1	introduction	introduction	NOUN
fuelectenerg-7534	8	2	since	since	SCONJ
fuelectenerg-7534	8	3	the	the	DET
fuelectenerg-7534	8	4	first	first	ADJ
fuelectenerg-7534	8	5	discussion	discussion	NOUN
fuelectenerg-7534	8	6	of	of	ADP
fuelectenerg-7534	8	7	rf	rf	ADJ
fuelectenerg-7534	8	8	-	-	PUNCT
fuelectenerg-7534	8	9	mems	mems	ADJ
fuelectenerg-7534	8	10	technology	technology	NOUN
fuelectenerg-7534	8	11	in	in	ADP
fuelectenerg-7534	8	12	late	late	ADJ
fuelectenerg-7534	8	13	`	`	PUNCT
fuelectenerg-7534	8	14	90s	90	NOUN
fuelectenerg-7534	8	15	,	,	PUNCT
fuelectenerg-7534	8	16	research	research	NOUN
fuelectenerg-7534	8	17	and	and	CCONJ
fuelectenerg-7534	8	18	expectations	expectation	NOUN
fuelectenerg-7534	8	19	concerning	concern	VERB
fuelectenerg-7534	8	20	this	this	DET
fuelectenerg-7534	8	21	topic	topic	NOUN
fuelectenerg-7534	8	22	have	have	AUX
fuelectenerg-7534	8	23	followed	follow	VERB
fuelectenerg-7534	8	24	a	a	DET
fuelectenerg-7534	8	25	fluctuating	fluctuate	VERB
fuelectenerg-7534	8	26	path	path	NOUN
fuelectenerg-7534	8	27	,	,	PUNCT
fuelectenerg-7534	8	28	alternating	alternate	VERB
fuelectenerg-7534	8	29	the	the	DET
fuelectenerg-7534	8	30	sensation	sensation	NOUN
fuelectenerg-7534	8	31	of	of	ADP
fuelectenerg-7534	8	32	a	a	DET
fuelectenerg-7534	8	33	general	general	ADJ
fuelectenerg-7534	8	34	maturity	maturity	NOUN
fuelectenerg-7534	8	35	and	and	CCONJ
fuelectenerg-7534	8	36	the	the	DET
fuelectenerg-7534	8	37	need	need	NOUN
fuelectenerg-7534	8	38	of	of	ADP
fuelectenerg-7534	8	39	some	some	DET
fuelectenerg-7534	8	40	improvement	improvement	NOUN
fuelectenerg-7534	8	41	to	to	PART
fuelectenerg-7534	8	42	allow	allow	VERB
fuelectenerg-7534	8	43	its	its	PRON
fuelectenerg-7534	8	44	practical	practical	ADJ
fuelectenerg-7534	8	45	utilization	utilization	NOUN
fuelectenerg-7534	8	46	.	.	PUNCT
fuelectenerg-7534	9	1	after	after	ADP
fuelectenerg-7534	9	2	an	an	DET
fuelectenerg-7534	9	3	initial	initial	ADJ
fuelectenerg-7534	9	4	enthusiasm	enthusiasm	NOUN
fuelectenerg-7534	9	5	towards	towards	ADP
fuelectenerg-7534	9	6	rf	rf	ADJ
fuelectenerg-7534	9	7	passives	passive	NOUN
fuelectenerg-7534	9	8	based	base	VERB
fuelectenerg-7534	9	9	on	on	ADP
fuelectenerg-7534	9	10	mems	mem	NOUN
fuelectenerg-7534	9	11	,	,	PUNCT
fuelectenerg-7534	9	12	triggered	trigger	VERB
fuelectenerg-7534	9	13	by	by	ADP
fuelectenerg-7534	9	14	their	their	PRON
fuelectenerg-7534	9	15	outstanding	outstanding	ADJ
fuelectenerg-7534	9	16	performances	performance	NOUN
fuelectenerg-7534	9	17	,	,	PUNCT
fuelectenerg-7534	9	18	a	a	DET
fuelectenerg-7534	9	19	subsequent	subsequent	ADJ
fuelectenerg-7534	9	20	phase	phase	NOUN
fuelectenerg-7534	9	21	of	of	ADP
fuelectenerg-7534	9	22	research	research	NOUN
fuelectenerg-7534	9	23	was	be	AUX
fuelectenerg-7534	9	24	needed	need	VERB
fuelectenerg-7534	9	25	to	to	PART
fuelectenerg-7534	9	26	overcome	overcome	VERB
fuelectenerg-7534	9	27	practical	practical	ADJ
fuelectenerg-7534	9	28	limits	limit	NOUN
fuelectenerg-7534	9	29	of	of	ADP
fuelectenerg-7534	9	30	these	these	DET
fuelectenerg-7534	9	31	electro	electro	ADJ
fuelectenerg-7534	9	32	-	-	PUNCT
fuelectenerg-7534	9	33	mechanical	mechanical	ADJ
fuelectenerg-7534	9	34	systems	system	NOUN
fuelectenerg-7534	9	35	,	,	PUNCT
fuelectenerg-7534	9	36	such	such	ADJ
fuelectenerg-7534	9	37	as	as	ADP
fuelectenerg-7534	9	38	reliability	reliability	NOUN
fuelectenerg-7534	9	39	and	and	CCONJ
fuelectenerg-7534	9	40	the	the	DET
fuelectenerg-7534	9	41	possibility	possibility	NOUN
fuelectenerg-7534	9	42	to	to	PART
fuelectenerg-7534	9	43	package	package	VERB
fuelectenerg-7534	9	44	and	and	CCONJ
fuelectenerg-7534	9	45	integrate	integrate	VERB
fuelectenerg-7534	9	46	the	the	DET
fuelectenerg-7534	9	47	devices	device	NOUN
fuelectenerg-7534	9	48	with	with	ADP
fuelectenerg-7534	9	49	other	other	ADJ
fuelectenerg-7534	9	50	existing	exist	VERB
fuelectenerg-7534	9	51	technologies	technology	NOUN
fuelectenerg-7534	9	52	.	.	PUNCT
fuelectenerg-7534	10	1	once	once	SCONJ
fuelectenerg-7534	10	2	these	these	DET
fuelectenerg-7534	10	3	issues	issue	NOUN
fuelectenerg-7534	10	4	received	receive	VERB
fuelectenerg-7534	10	5	march	march	PROPN
fuelectenerg-7534	10	6	08	08	NUM
fuelectenerg-7534	10	7	,	,	PUNCT
fuelectenerg-7534	10	8	2021	2021	NUM
fuelectenerg-7534	10	9	;	;	PUNCT
fuelectenerg-7534	10	10	received	receive	VERB
fuelectenerg-7534	10	11	in	in	ADP
fuelectenerg-7534	10	12	revised	revise	VERB
fuelectenerg-7534	10	13	form	form	NOUN
fuelectenerg-7534	10	14	april	april	PROPN
fuelectenerg-7534	10	15	05	05	NUM
fuelectenerg-7534	10	16	,	,	PUNCT
fuelectenerg-7534	10	17	2021	2021	NUM
fuelectenerg-7534	10	18	corresponding	correspond	VERB
fuelectenerg-7534	10	19	author	author	NOUN
fuelectenerg-7534	10	20	:	:	PUNCT
fuelectenerg-7534	10	21	girolamo	girolamo	PROPN
fuelectenerg-7534	10	22	tagliapietra	tagliapietra	PROPN
fuelectenerg-7534	10	23	center	center	NOUN
fuelectenerg-7534	10	24	for	for	ADP
fuelectenerg-7534	10	25	sensors	sensor	NOUN
fuelectenerg-7534	10	26	and	and	CCONJ
fuelectenerg-7534	10	27	devices	device	NOUN
fuelectenerg-7534	10	28	(	(	PUNCT
fuelectenerg-7534	10	29	sd	sd	NOUN
fuelectenerg-7534	10	30	)	)	PUNCT
fuelectenerg-7534	10	31	fondazione	fondazione	NOUN
fuelectenerg-7534	10	32	bruno	bruno	PROPN
fuelectenerg-7534	10	33	kessler	kessler	PROPN
fuelectenerg-7534	10	34	(	(	PUNCT
fuelectenerg-7534	10	35	fbk	fbk	PROPN
fuelectenerg-7534	10	36	)	)	PUNCT
fuelectenerg-7534	10	37	,	,	PUNCT
fuelectenerg-7534	10	38	trento-38123	trento-38123	NOUN
fuelectenerg-7534	10	39	,	,	PUNCT
fuelectenerg-7534	10	40	italy	italy	PROPN
fuelectenerg-7534	10	41	e	e	PROPN
fuelectenerg-7534	10	42	-	-	NOUN
fuelectenerg-7534	10	43	mail	mail	NOUN
fuelectenerg-7534	10	44	:	:	PUNCT
fuelectenerg-7534	10	45	gtagliapietra@fbk.eu	gtagliapietra@fbk.eu	NOUN
fuelectenerg-7534	10	46	*	*	PUNCT
fuelectenerg-7534	10	47	an	an	DET
fuelectenerg-7534	10	48	earlier	early	ADJ
fuelectenerg-7534	10	49	version	version	NOUN
fuelectenerg-7534	10	50	of	of	ADP
fuelectenerg-7534	10	51	this	this	DET
fuelectenerg-7534	10	52	paper	paper	NOUN
fuelectenerg-7534	10	53	was	be	AUX
fuelectenerg-7534	10	54	presented	present	VERB
fuelectenerg-7534	10	55	at	at	ADP
fuelectenerg-7534	10	56	the	the	DET
fuelectenerg-7534	10	57	1st	1st	ADJ
fuelectenerg-7534	10	58	international	international	ADJ
fuelectenerg-7534	10	59	conference	conference	NOUN
fuelectenerg-7534	10	60	on	on	ADP
fuelectenerg-7534	10	61	micro	micro	ADJ
fuelectenerg-7534	10	62	/	/	NOUN
fuelectenerg-7534	10	63	nanoelectronics	nanoelectronic	NOUN
fuelectenerg-7534	10	64	devices	device	NOUN
fuelectenerg-7534	10	65	,	,	PUNCT
fuelectenerg-7534	10	66	circuits	circuit	NOUN
fuelectenerg-7534	10	67	and	and	CCONJ
fuelectenerg-7534	10	68	systems	system	NOUN
fuelectenerg-7534	10	69	(	(	PUNCT
fuelectenerg-7534	10	70	mndcs	mndc	NOUN
fuelectenerg-7534	10	71	2021	2021	NUM
fuelectenerg-7534	10	72	)	)	PUNCT
fuelectenerg-7534	10	73	,	,	PUNCT
fuelectenerg-7534	10	74	29	29	NUM
fuelectenerg-7534	10	75	31	31	NUM
fuelectenerg-7534	10	76	january	january	PROPN
fuelectenerg-7534	10	77	,	,	PUNCT
fuelectenerg-7534	10	78	2021	2021	NUM
fuelectenerg-7534	10	79	,	,	PUNCT
fuelectenerg-7534	10	80	in	in	ADP
fuelectenerg-7534	10	81	silchar	silchar	PROPN
fuelectenerg-7534	10	82	,	,	PUNCT
fuelectenerg-7534	10	83	assam	assam	PROPN
fuelectenerg-7534	10	84	,	,	PUNCT
fuelectenerg-7534	10	85	india	india	PROPN
fuelectenerg-7534	10	86	.	.	PUNCT
fuelectenerg-7534	11	1	[	[	X
fuelectenerg-7534	11	2	1	1	NUM
fuelectenerg-7534	11	3	]	]	PUNCT
fuelectenerg-7534	11	4	.	.	PUNCT
fuelectenerg-7534	12	1	334	334	NUM
fuelectenerg-7534	12	2	g.	g.	NOUN
fuelectenerg-7534	12	3	tagliapietra	tagliapietra	PROPN
fuelectenerg-7534	12	4	,	,	PUNCT
fuelectenerg-7534	12	5	j.	j.	PROPN
fuelectenerg-7534	12	6	iannacci	iannacci	PROPN
fuelectenerg-7534	12	7	were	be	AUX
fuelectenerg-7534	12	8	addressed	address	VERB
fuelectenerg-7534	12	9	and	and	CCONJ
fuelectenerg-7534	12	10	rf	rf	VERB
fuelectenerg-7534	12	11	-	-	PUNCT
fuelectenerg-7534	12	12	mems	mem	NOUN
fuelectenerg-7534	12	13	reached	reach	VERB
fuelectenerg-7534	12	14	a	a	DET
fuelectenerg-7534	12	15	renewed	renew	VERB
fuelectenerg-7534	12	16	solidity	solidity	NOUN
fuelectenerg-7534	12	17	,	,	PUNCT
fuelectenerg-7534	12	18	their	their	PRON
fuelectenerg-7534	12	19	supposed	suppose	VERB
fuelectenerg-7534	12	20	wide	wide	ADJ
fuelectenerg-7534	12	21	-	-	PUNCT
fuelectenerg-7534	12	22	scale	scale	NOUN
fuelectenerg-7534	12	23	market	market	NOUN
fuelectenerg-7534	12	24	absorption	absorption	NOUN
fuelectenerg-7534	12	25	in	in	ADP
fuelectenerg-7534	12	26	rf	rf	ADJ
fuelectenerg-7534	12	27	and	and	CCONJ
fuelectenerg-7534	12	28	millimeter	millimeter	NOUN
fuelectenerg-7534	12	29	wave	wave	NOUN
fuelectenerg-7534	12	30	communications	communication	NOUN
fuelectenerg-7534	12	31	was	be	AUX
fuelectenerg-7534	12	32	opposed	oppose	VERB
fuelectenerg-7534	12	33	by	by	ADP
fuelectenerg-7534	12	34	a	a	DET
fuelectenerg-7534	12	35	scenario	scenario	NOUN
fuelectenerg-7534	12	36	already	already	ADV
fuelectenerg-7534	12	37	dominated	dominate	VERB
fuelectenerg-7534	12	38	by	by	ADP
fuelectenerg-7534	12	39	cheaper	cheap	ADJ
fuelectenerg-7534	12	40	and	and	CCONJ
fuelectenerg-7534	12	41	more	more	ADV
fuelectenerg-7534	12	42	consolidated	consolidated	ADJ
fuelectenerg-7534	12	43	technologies	technology	NOUN
fuelectenerg-7534	12	44	.	.	PUNCT
fuelectenerg-7534	13	1	in	in	ADP
fuelectenerg-7534	13	2	fact	fact	NOUN
fuelectenerg-7534	13	3	,	,	PUNCT
fuelectenerg-7534	13	4	advantages	advantage	NOUN
fuelectenerg-7534	13	5	and	and	CCONJ
fuelectenerg-7534	13	6	commendable	commendable	ADJ
fuelectenerg-7534	13	7	performances	performance	NOUN
fuelectenerg-7534	13	8	of	of	ADP
fuelectenerg-7534	13	9	rf	rf	NOUN
fuelectenerg-7534	13	10	-	-	PUNCT
fuelectenerg-7534	13	11	mems	mem	NOUN
fuelectenerg-7534	13	12	were	be	AUX
fuelectenerg-7534	13	13	not	not	PART
fuelectenerg-7534	13	14	essential	essential	ADJ
fuelectenerg-7534	13	15	for	for	ADP
fuelectenerg-7534	13	16	the	the	DET
fuelectenerg-7534	13	17	implementation	implementation	NOUN
fuelectenerg-7534	13	18	of	of	ADP
fuelectenerg-7534	13	19	communication	communication	NOUN
fuelectenerg-7534	13	20	standards	standard	NOUN
fuelectenerg-7534	13	21	at	at	ADP
fuelectenerg-7534	13	22	the	the	DET
fuelectenerg-7534	13	23	time	time	NOUN
fuelectenerg-7534	13	24	[	[	X
fuelectenerg-7534	13	25	2	2	NUM
fuelectenerg-7534	13	26	]	]	PUNCT
fuelectenerg-7534	13	27	.	.	PUNCT
fuelectenerg-7534	14	1	nevertheless	nevertheless	ADV
fuelectenerg-7534	14	2	,	,	PUNCT
fuelectenerg-7534	14	3	the	the	DET
fuelectenerg-7534	14	4	last	last	ADJ
fuelectenerg-7534	14	5	half	half	NOUN
fuelectenerg-7534	14	6	decade	decade	NOUN
fuelectenerg-7534	14	7	portrays	portray	VERB
fuelectenerg-7534	14	8	a	a	DET
fuelectenerg-7534	14	9	more	more	ADV
fuelectenerg-7534	14	10	encouraging	encouraging	ADJ
fuelectenerg-7534	14	11	scenario	scenario	NOUN
fuelectenerg-7534	14	12	:	:	PUNCT
fuelectenerg-7534	14	13	an	an	DET
fuelectenerg-7534	14	14	increasing	increase	VERB
fuelectenerg-7534	14	15	presence	presence	NOUN
fuelectenerg-7534	14	16	of	of	ADP
fuelectenerg-7534	14	17	rf	rf	NOUN
fuelectenerg-7534	14	18	-	-	PUNCT
fuelectenerg-7534	14	19	mems	mem	NOUN
fuelectenerg-7534	14	20	on	on	ADP
fuelectenerg-7534	14	21	the	the	DET
fuelectenerg-7534	14	22	market	market	NOUN
fuelectenerg-7534	14	23	,	,	PUNCT
fuelectenerg-7534	14	24	determined	determine	VERB
fuelectenerg-7534	14	25	by	by	ADP
fuelectenerg-7534	14	26	a	a	DET
fuelectenerg-7534	14	27	general	general	ADJ
fuelectenerg-7534	14	28	maturity	maturity	NOUN
fuelectenerg-7534	14	29	of	of	ADP
fuelectenerg-7534	14	30	this	this	DET
fuelectenerg-7534	14	31	technology	technology	NOUN
fuelectenerg-7534	14	32	.	.	PUNCT
fuelectenerg-7534	15	1	nowadays	nowadays	ADV
fuelectenerg-7534	15	2	,	,	PUNCT
fuelectenerg-7534	15	3	components	component	NOUN
fuelectenerg-7534	15	4	based	base	VERB
fuelectenerg-7534	15	5	on	on	ADP
fuelectenerg-7534	15	6	rf	rf	NOUN
fuelectenerg-7534	15	7	-	-	PUNCT
fuelectenerg-7534	15	8	mems	mem	NOUN
fuelectenerg-7534	15	9	are	be	AUX
fuelectenerg-7534	15	10	commonly	commonly	ADV
fuelectenerg-7534	15	11	available	available	ADJ
fuelectenerg-7534	15	12	[	[	X
fuelectenerg-7534	15	13	3	3	NUM
fuelectenerg-7534	15	14	]	]	PUNCT
fuelectenerg-7534	15	15	,	,	PUNCT
fuelectenerg-7534	15	16	so	so	SCONJ
fuelectenerg-7534	15	17	that	that	SCONJ
fuelectenerg-7534	15	18	to	to	PART
fuelectenerg-7534	15	19	be	be	AUX
fuelectenerg-7534	15	20	employed	employ	VERB
fuelectenerg-7534	15	21	in	in	ADP
fuelectenerg-7534	15	22	base	base	NOUN
fuelectenerg-7534	15	23	stations	station	NOUN
fuelectenerg-7534	15	24	[	[	X
fuelectenerg-7534	15	25	4	4	NUM
fuelectenerg-7534	15	26	]	]	PUNCT
fuelectenerg-7534	15	27	and	and	CCONJ
fuelectenerg-7534	15	28	mobile	mobile	ADJ
fuelectenerg-7534	15	29	devices	device	NOUN
fuelectenerg-7534	15	30	[	[	X
fuelectenerg-7534	15	31	5	5	NUM
fuelectenerg-7534	15	32	]	]	PUNCT
fuelectenerg-7534	15	33	.	.	PUNCT
fuelectenerg-7534	16	1	moreover	moreover	ADV
fuelectenerg-7534	16	2	,	,	PUNCT
fuelectenerg-7534	16	3	rf	rf	NOUN
fuelectenerg-7534	16	4	-	-	PUNCT
fuelectenerg-7534	16	5	mems	mem	NOUN
fuelectenerg-7534	16	6	are	be	AUX
fuelectenerg-7534	16	7	predicted	predict	VERB
fuelectenerg-7534	16	8	to	to	PART
fuelectenerg-7534	16	9	play	play	VERB
fuelectenerg-7534	16	10	a	a	DET
fuelectenerg-7534	16	11	prominent	prominent	ADJ
fuelectenerg-7534	16	12	role	role	NOUN
fuelectenerg-7534	16	13	in	in	ADP
fuelectenerg-7534	16	14	the	the	DET
fuelectenerg-7534	16	15	deployment	deployment	NOUN
fuelectenerg-7534	16	16	of	of	ADP
fuelectenerg-7534	16	17	the	the	DET
fuelectenerg-7534	16	18	emerging	emerge	VERB
fuelectenerg-7534	16	19	5	5	NUM
fuelectenerg-7534	16	20	g	g	NOUN
fuelectenerg-7534	16	21	mobile	mobile	ADJ
fuelectenerg-7534	16	22	communication	communication	NOUN
fuelectenerg-7534	16	23	standard	standard	NOUN
fuelectenerg-7534	16	24	,	,	PUNCT
fuelectenerg-7534	16	25	capitalising	capitalise	VERB
fuelectenerg-7534	16	26	on	on	ADP
fuelectenerg-7534	16	27	their	their	PRON
fuelectenerg-7534	16	28	remarkable	remarkable	ADJ
fuelectenerg-7534	16	29	features	feature	NOUN
fuelectenerg-7534	16	30	of	of	ADP
fuelectenerg-7534	16	31	reconfigurability	reconfigurability	NOUN
fuelectenerg-7534	16	32	,	,	PUNCT
fuelectenerg-7534	16	33	low	low	ADJ
fuelectenerg-7534	16	34	power	power	NOUN
fuelectenerg-7534	16	35	consumption	consumption	NOUN
fuelectenerg-7534	16	36	and	and	CCONJ
fuelectenerg-7534	16	37	rf	rf	NOUN
fuelectenerg-7534	16	38	performances	performance	NOUN
fuelectenerg-7534	16	39	along	along	ADP
fuelectenerg-7534	16	40	wide	wide	ADJ
fuelectenerg-7534	16	41	portions	portion	NOUN
fuelectenerg-7534	16	42	of	of	ADP
fuelectenerg-7534	16	43	frequency	frequency	NOUN
fuelectenerg-7534	16	44	spectra	spectra	NOUN
fuelectenerg-7534	17	1	[	[	X
fuelectenerg-7534	17	2	6	6	NUM
fuelectenerg-7534	17	3	]	]	PUNCT
fuelectenerg-7534	17	4	.	.	PUNCT
fuelectenerg-7534	18	1	differently	differently	ADV
fuelectenerg-7534	18	2	from	from	ADP
fuelectenerg-7534	18	3	previous	previous	ADJ
fuelectenerg-7534	18	4	opportunities	opportunity	NOUN
fuelectenerg-7534	18	5	,	,	PUNCT
fuelectenerg-7534	18	6	in	in	ADP
fuelectenerg-7534	18	7	the	the	DET
fuelectenerg-7534	18	8	current	current	ADJ
fuelectenerg-7534	18	9	scenario	scenario	NOUN
fuelectenerg-7534	18	10	,	,	PUNCT
fuelectenerg-7534	18	11	the	the	DET
fuelectenerg-7534	18	12	increasing	increase	VERB
fuelectenerg-7534	18	13	interest	interest	NOUN
fuelectenerg-7534	18	14	towards	towards	ADP
fuelectenerg-7534	18	15	rf	rf	NOUN
fuelectenerg-7534	18	16	-	-	PUNCT
fuelectenerg-7534	18	17	mems	mem	NOUN
fuelectenerg-7534	18	18	is	be	AUX
fuelectenerg-7534	18	19	actually	actually	ADV
fuelectenerg-7534	18	20	driven	drive	VERB
fuelectenerg-7534	18	21	by	by	ADP
fuelectenerg-7534	18	22	the	the	DET
fuelectenerg-7534	18	23	needs	need	NOUN
fuelectenerg-7534	18	24	of	of	ADP
fuelectenerg-7534	18	25	market	market	NOUN
fuelectenerg-7534	18	26	.	.	PUNCT
fuelectenerg-7534	19	1	the	the	DET
fuelectenerg-7534	19	2	use	use	NOUN
fuelectenerg-7534	19	3	of	of	ADP
fuelectenerg-7534	19	4	femtocells	femtocell	NOUN
fuelectenerg-7534	19	5	,	,	PUNCT
fuelectenerg-7534	19	6	picocells	picocell	NOUN
fuelectenerg-7534	19	7	and	and	CCONJ
fuelectenerg-7534	19	8	microcells	microcell	NOUN
fuelectenerg-7534	19	9	to	to	PART
fuelectenerg-7534	19	10	achieve	achieve	VERB
fuelectenerg-7534	19	11	high	high	ADJ
fuelectenerg-7534	19	12	data	datum	NOUN
fuelectenerg-7534	19	13	rates	rate	NOUN
fuelectenerg-7534	19	14	imposes	impose	VERB
fuelectenerg-7534	19	15	the	the	DET
fuelectenerg-7534	19	16	employment	employment	NOUN
fuelectenerg-7534	19	17	of	of	ADP
fuelectenerg-7534	19	18	reliable	reliable	ADJ
fuelectenerg-7534	19	19	,	,	PUNCT
fuelectenerg-7534	19	20	fast	fast	ADJ
fuelectenerg-7534	19	21	and	and	CCONJ
fuelectenerg-7534	19	22	wideband	wideband	NOUN
fuelectenerg-7534	19	23	devices	device	NOUN
fuelectenerg-7534	19	24	,	,	PUNCT
fuelectenerg-7534	19	25	capable	capable	ADJ
fuelectenerg-7534	19	26	to	to	PART
fuelectenerg-7534	19	27	operate	operate	VERB
fuelectenerg-7534	19	28	along	along	ADP
fuelectenerg-7534	19	29	frequency	frequency	NOUN
fuelectenerg-7534	19	30	bands	band	NOUN
fuelectenerg-7534	19	31	below	below	ADP
fuelectenerg-7534	19	32	6	6	NUM
fuelectenerg-7534	19	33	ghz	ghz	NOUN
fuelectenerg-7534	19	34	and	and	CCONJ
fuelectenerg-7534	19	35	up	up	ADP
fuelectenerg-7534	19	36	to	to	ADP
fuelectenerg-7534	19	37	(	(	PUNCT
fuelectenerg-7534	19	38	24.25	24.25	NUM
fuelectenerg-7534	19	39	-	-	SYM
fuelectenerg-7534	19	40	29.5	29.5	NUM
fuelectenerg-7534	19	41	)	)	PUNCT
fuelectenerg-7534	19	42	ghz	ghz	NOUN
fuelectenerg-7534	19	43	,	,	PUNCT
fuelectenerg-7534	19	44	(	(	PUNCT
fuelectenerg-7534	19	45	37	37	NUM
fuelectenerg-7534	19	46	-	-	SYM
fuelectenerg-7534	19	47	43.5	43.5	NUM
fuelectenerg-7534	19	48	)	)	PUNCT
fuelectenerg-7534	19	49	ghz	ghz	NOUN
fuelectenerg-7534	19	50	,	,	PUNCT
fuelectenerg-7534	19	51	and	and	CCONJ
fuelectenerg-7534	19	52	(	(	PUNCT
fuelectenerg-7534	19	53	64	64	NUM
fuelectenerg-7534	19	54	-	-	SYM
fuelectenerg-7534	19	55	71	71	NUM
fuelectenerg-7534	19	56	)	)	PUNCT
fuelectenerg-7534	19	57	ghz	ghz	NOUN
fuelectenerg-7534	19	58	bands	band	NOUN
fuelectenerg-7534	19	59	,	,	PUNCT
fuelectenerg-7534	19	60	depending	depend	VERB
fuelectenerg-7534	19	61	on	on	ADP
fuelectenerg-7534	19	62	the	the	DET
fuelectenerg-7534	19	63	specific	specific	ADJ
fuelectenerg-7534	19	64	country	country	NOUN
fuelectenerg-7534	20	1	[	[	X
fuelectenerg-7534	20	2	7][8	7][8	X
fuelectenerg-7534	20	3	]	]	X
fuelectenerg-7534	20	4	.	.	PUNCT
fuelectenerg-7534	21	1	from	from	ADP
fuelectenerg-7534	21	2	a	a	DET
fuelectenerg-7534	21	3	more	more	ADJ
fuelectenerg-7534	21	4	“	"	PUNCT
fuelectenerg-7534	21	5	macroscopic	macroscopic	ADJ
fuelectenerg-7534	21	6	”	"	PUNCT
fuelectenerg-7534	21	7	point	point	NOUN
fuelectenerg-7534	21	8	of	of	ADP
fuelectenerg-7534	21	9	view	view	NOUN
fuelectenerg-7534	21	10	,	,	PUNCT
fuelectenerg-7534	21	11	the	the	DET
fuelectenerg-7534	21	12	use	use	NOUN
fuelectenerg-7534	21	13	of	of	ADP
fuelectenerg-7534	21	14	highly	highly	ADV
fuelectenerg-7534	21	15	reconfigurable	reconfigurable	ADJ
fuelectenerg-7534	21	16	mimo	mimo	PROPN
fuelectenerg-7534	21	17	antennas	antennas	PROPN
fuelectenerg-7534	21	18	,	,	PUNCT
fuelectenerg-7534	21	19	together	together	ADV
fuelectenerg-7534	21	20	with	with	ADP
fuelectenerg-7534	21	21	proper	proper	ADJ
fuelectenerg-7534	21	22	beam	beam	NOUN
fuelectenerg-7534	21	23	forming	form	VERB
fuelectenerg-7534	21	24	and	and	CCONJ
fuelectenerg-7534	21	25	beam	beam	NOUN
fuelectenerg-7534	21	26	steering	steering	NOUN
fuelectenerg-7534	21	27	of	of	ADP
fuelectenerg-7534	21	28	the	the	DET
fuelectenerg-7534	21	29	basic	basic	ADJ
fuelectenerg-7534	21	30	radiation	radiation	NOUN
fuelectenerg-7534	21	31	pattern	pattern	NOUN
fuelectenerg-7534	21	32	is	be	AUX
fuelectenerg-7534	21	33	introduced	introduce	VERB
fuelectenerg-7534	21	34	to	to	PART
fuelectenerg-7534	21	35	maximize	maximize	VERB
fuelectenerg-7534	21	36	the	the	DET
fuelectenerg-7534	21	37	bandwidth	bandwidth	NOUN
fuelectenerg-7534	21	38	available	available	ADJ
fuelectenerg-7534	21	39	to	to	ADP
fuelectenerg-7534	21	40	users	user	NOUN
fuelectenerg-7534	21	41	[	[	X
fuelectenerg-7534	21	42	7	7	NUM
fuelectenerg-7534	21	43	]	]	PUNCT
fuelectenerg-7534	21	44	.	.	PUNCT
fuelectenerg-7534	22	1	as	as	SCONJ
fuelectenerg-7534	22	2	mentioned	mention	VERB
fuelectenerg-7534	22	3	in	in	ADP
fuelectenerg-7534	22	4	[	[	X
fuelectenerg-7534	22	5	9	9	NUM
fuelectenerg-7534	22	6	]	]	PUNCT
fuelectenerg-7534	22	7	,	,	PUNCT
fuelectenerg-7534	22	8	in	in	ADP
fuelectenerg-7534	22	9	order	order	NOUN
fuelectenerg-7534	22	10	to	to	PART
fuelectenerg-7534	22	11	properly	properly	ADV
fuelectenerg-7534	22	12	implement	implement	VERB
fuelectenerg-7534	22	13	a	a	DET
fuelectenerg-7534	22	14	network	network	NOUN
fuelectenerg-7534	22	15	characterized	characterize	VERB
fuelectenerg-7534	22	16	by	by	ADP
fuelectenerg-7534	22	17	such	such	ADJ
fuelectenerg-7534	22	18	variety	variety	NOUN
fuelectenerg-7534	22	19	of	of	ADP
fuelectenerg-7534	22	20	access	access	NOUN
fuelectenerg-7534	22	21	points	point	NOUN
fuelectenerg-7534	22	22	,	,	PUNCT
fuelectenerg-7534	22	23	various	various	ADJ
fuelectenerg-7534	22	24	classes	class	NOUN
fuelectenerg-7534	22	25	of	of	ADP
fuelectenerg-7534	22	26	powerful	powerful	ADJ
fuelectenerg-7534	22	27	rf	rf	ADJ
fuelectenerg-7534	22	28	passives	passive	NOUN
fuelectenerg-7534	22	29	are	be	AUX
fuelectenerg-7534	22	30	required	require	VERB
fuelectenerg-7534	22	31	,	,	PUNCT
fuelectenerg-7534	22	32	including	include	VERB
fuelectenerg-7534	22	33	:	:	PUNCT
fuelectenerg-7534	22	34	▪	▪	ADJ
fuelectenerg-7534	22	35	very	very	ADV
fuelectenerg-7534	22	36	-	-	PUNCT
fuelectenerg-7534	22	37	wideband	wideband	NOUN
fuelectenerg-7534	22	38	switches	switch	NOUN
fuelectenerg-7534	22	39	and	and	CCONJ
fuelectenerg-7534	22	40	switching	switch	VERB
fuelectenerg-7534	22	41	networks	network	NOUN
fuelectenerg-7534	22	42	(	(	PUNCT
fuelectenerg-7534	22	43	e.g.	e.g.	ADV
fuelectenerg-7534	22	44	mpmt	mpmt	VERB
fuelectenerg-7534	22	45	multiple	multiple	ADJ
fuelectenerg-7534	22	46	pole	pole	NOUN
fuelectenerg-7534	22	47	multiple	multiple	ADJ
fuelectenerg-7534	22	48	throw	throw	NOUN
fuelectenerg-7534	22	49	)	)	PUNCT
fuelectenerg-7534	22	50	,	,	PUNCT
fuelectenerg-7534	22	51	characterized	characterize	VERB
fuelectenerg-7534	22	52	by	by	ADP
fuelectenerg-7534	22	53	low	low	ADJ
fuelectenerg-7534	22	54	losses	loss	NOUN
fuelectenerg-7534	22	55	,	,	PUNCT
fuelectenerg-7534	22	56	high	high	ADJ
fuelectenerg-7534	22	57	isolation	isolation	NOUN
fuelectenerg-7534	22	58	and	and	CCONJ
fuelectenerg-7534	22	59	extremely	extremely	ADV
fuelectenerg-7534	22	60	low	low	ADJ
fuelectenerg-7534	22	61	cross	cross	NOUN
fuelectenerg-7534	22	62	-	-	NOUN
fuelectenerg-7534	22	63	talk	talk	NOUN
fuelectenerg-7534	22	64	between	between	ADP
fuelectenerg-7534	22	65	adjacent	adjacent	ADJ
fuelectenerg-7534	22	66	channels	channel	NOUN
fuelectenerg-7534	22	67	along	along	ADP
fuelectenerg-7534	22	68	the	the	DET
fuelectenerg-7534	22	69	aforementioned	aforementioned	ADJ
fuelectenerg-7534	22	70	frequency	frequency	NOUN
fuelectenerg-7534	22	71	bands	band	NOUN
fuelectenerg-7534	22	72	.	.	PUNCT
fuelectenerg-7534	23	1	▪	▪	NOUN
fuelectenerg-7534	23	2	reconfigurable	reconfigurable	ADJ
fuelectenerg-7534	23	3	filters	filter	NOUN
fuelectenerg-7534	23	4	with	with	ADP
fuelectenerg-7534	23	5	substantial	substantial	ADJ
fuelectenerg-7534	23	6	rejection	rejection	NOUN
fuelectenerg-7534	23	7	along	along	ADP
fuelectenerg-7534	23	8	stopband	stopband	NOUN
fuelectenerg-7534	23	9	and	and	CCONJ
fuelectenerg-7534	23	10	minimal	minimal	ADJ
fuelectenerg-7534	23	11	attenuation	attenuation	NOUN
fuelectenerg-7534	23	12	along	along	ADP
fuelectenerg-7534	23	13	the	the	DET
fuelectenerg-7534	23	14	passband	passband	NOUN
fuelectenerg-7534	23	15	.	.	PUNCT
fuelectenerg-7534	24	1	▪	▪	ADJ
fuelectenerg-7534	24	2	very	very	ADV
fuelectenerg-7534	24	3	-	-	PUNCT
fuelectenerg-7534	24	4	wideband	wideband	NOUN
fuelectenerg-7534	24	5	impedance	impedance	NOUN
fuelectenerg-7534	24	6	tuners	tuner	NOUN
fuelectenerg-7534	24	7	with	with	ADP
fuelectenerg-7534	24	8	multiple	multiple	ADJ
fuelectenerg-7534	24	9	states	state	NOUN
fuelectenerg-7534	24	10	.	.	PUNCT
fuelectenerg-7534	25	1	▪	▪	ADJ
fuelectenerg-7534	25	2	programmable	programmable	ADJ
fuelectenerg-7534	25	3	attenuators	attenuator	NOUN
fuelectenerg-7534	25	4	with	with	ADP
fuelectenerg-7534	25	5	multiple	multiple	ADJ
fuelectenerg-7534	25	6	configurations	configuration	NOUN
fuelectenerg-7534	25	7	and	and	CCONJ
fuelectenerg-7534	25	8	constantly	constantly	ADV
fuelectenerg-7534	25	9	at	at	ADP
fuelectenerg-7534	25	10	attenuation	attenuation	NOUN
fuelectenerg-7534	25	11	along	along	ADP
fuelectenerg-7534	25	12	the	the	DET
fuelectenerg-7534	25	13	considered	consider	VERB
fuelectenerg-7534	25	14	portions	portion	NOUN
fuelectenerg-7534	25	15	of	of	ADP
fuelectenerg-7534	25	16	spectrum	spectrum	NOUN
fuelectenerg-7534	25	17	.	.	PUNCT
fuelectenerg-7534	26	1	▪	▪	ADJ
fuelectenerg-7534	26	2	very	very	ADV
fuelectenerg-7534	26	3	-	-	PUNCT
fuelectenerg-7534	26	4	wideband	wideband	ADJ
fuelectenerg-7534	26	5	digital	digital	ADJ
fuelectenerg-7534	26	6	/	/	SYM
fuelectenerg-7534	26	7	analog	analog	NOUN
fuelectenerg-7534	26	8	phase	phase	NOUN
fuelectenerg-7534	26	9	shifters	shifter	NOUN
fuelectenerg-7534	26	10	with	with	ADP
fuelectenerg-7534	26	11	multiple	multiple	ADJ
fuelectenerg-7534	26	12	achievable	achievable	ADJ
fuelectenerg-7534	26	13	values	value	NOUN
fuelectenerg-7534	26	14	of	of	ADP
fuelectenerg-7534	26	15	phase	phase	NOUN
fuelectenerg-7534	26	16	shift	shift	NOUN
fuelectenerg-7534	26	17	.	.	PUNCT
fuelectenerg-7534	27	1	▪	▪	ADJ
fuelectenerg-7534	27	2	hybrid	hybrid	ADJ
fuelectenerg-7534	27	3	devices	device	NOUN
fuelectenerg-7534	27	4	,	,	PUNCT
fuelectenerg-7534	27	5	comprising	comprise	VERB
fuelectenerg-7534	27	6	both	both	CCONJ
fuelectenerg-7534	27	7	attenuation	attenuation	NOUN
fuelectenerg-7534	27	8	and	and	CCONJ
fuelectenerg-7534	27	9	phase	phase	NOUN
fuelectenerg-7534	27	10	shifting	shift	VERB
fuelectenerg-7534	27	11	capabilities	capability	NOUN
fuelectenerg-7534	27	12	into	into	ADP
fuelectenerg-7534	27	13	a	a	DET
fuelectenerg-7534	27	14	single	single	ADJ
fuelectenerg-7534	27	15	device	device	NOUN
fuelectenerg-7534	27	16	.	.	PUNCT
fuelectenerg-7534	28	1	▪	▪	ADJ
fuelectenerg-7534	28	2	miniaturized	miniaturize	VERB
fuelectenerg-7534	28	3	antennas	antenna	NOUN
fuelectenerg-7534	28	4	and	and	CCONJ
fuelectenerg-7534	28	5	antenna	antenna	NOUN
fuelectenerg-7534	28	6	arrays	array	VERB
fuelectenerg-7534	28	7	permitting	permit	VERB
fuelectenerg-7534	28	8	monolithic	monolithic	ADJ
fuelectenerg-7534	28	9	integration	integration	NOUN
fuelectenerg-7534	28	10	of	of	ADP
fuelectenerg-7534	28	11	the	the	DET
fuelectenerg-7534	28	12	radiating	radiating	NOUN
fuelectenerg-7534	28	13	element	element	NOUN
fuelectenerg-7534	28	14	with	with	ADP
fuelectenerg-7534	28	15	abovementioned	abovementioned	ADJ
fuelectenerg-7534	28	16	components	component	NOUN
fuelectenerg-7534	28	17	.	.	PUNCT
fuelectenerg-7534	29	1	thus	thus	ADV
fuelectenerg-7534	29	2	,	,	PUNCT
fuelectenerg-7534	29	3	depending	depend	VERB
fuelectenerg-7534	29	4	on	on	ADP
fuelectenerg-7534	29	5	the	the	DET
fuelectenerg-7534	29	6	specific	specific	ADJ
fuelectenerg-7534	29	7	desired	desire	VERB
fuelectenerg-7534	29	8	functionalities	functionality	NOUN
fuelectenerg-7534	29	9	,	,	PUNCT
fuelectenerg-7534	29	10	rf	rf	ADJ
fuelectenerg-7534	29	11	-	-	PUNCT
fuelectenerg-7534	29	12	mems	mem	NOUN
fuelectenerg-7534	29	13	devices	device	NOUN
fuelectenerg-7534	29	14	that	that	PRON
fuelectenerg-7534	29	15	could	could	AUX
fuelectenerg-7534	29	16	be	be	AUX
fuelectenerg-7534	29	17	adopted	adopt	VERB
fuelectenerg-7534	29	18	for	for	ADP
fuelectenerg-7534	29	19	implementation	implementation	NOUN
fuelectenerg-7534	29	20	of	of	ADP
fuelectenerg-7534	29	21	5	5	NUM
fuelectenerg-7534	29	22	g	g	NOUN
fuelectenerg-7534	29	23	standard	standard	NOUN
fuelectenerg-7534	29	24	should	should	AUX
fuelectenerg-7534	29	25	satisfy	satisfy	VERB
fuelectenerg-7534	29	26	different	different	ADJ
fuelectenerg-7534	29	27	specific	specific	ADJ
fuelectenerg-7534	29	28	constraints	constraint	NOUN
fuelectenerg-7534	29	29	.	.	PUNCT
fuelectenerg-7534	30	1	however	however	ADV
fuelectenerg-7534	30	2	,	,	PUNCT
fuelectenerg-7534	30	3	despite	despite	SCONJ
fuelectenerg-7534	30	4	the	the	DET
fuelectenerg-7534	30	5	variety	variety	NOUN
fuelectenerg-7534	30	6	of	of	ADP
fuelectenerg-7534	30	7	factors	factor	NOUN
fuelectenerg-7534	30	8	that	that	PRON
fuelectenerg-7534	30	9	may	may	AUX
fuelectenerg-7534	30	10	influence	influence	VERB
fuelectenerg-7534	30	11	the	the	DET
fuelectenerg-7534	30	12	requirements	requirement	NOUN
fuelectenerg-7534	30	13	for	for	ADP
fuelectenerg-7534	30	14	a	a	DET
fuelectenerg-7534	30	15	particular	particular	ADJ
fuelectenerg-7534	30	16	component	component	NOUN
fuelectenerg-7534	30	17	,	,	PUNCT
fuelectenerg-7534	30	18	it	it	PRON
fuelectenerg-7534	30	19	is	be	AUX
fuelectenerg-7534	30	20	possible	possible	ADJ
fuelectenerg-7534	30	21	to	to	PART
fuelectenerg-7534	30	22	quantitatively	quantitatively	ADV
fuelectenerg-7534	30	23	outline	outline	VERB
fuelectenerg-7534	30	24	a	a	DET
fuelectenerg-7534	30	25	set	set	NOUN
fuelectenerg-7534	30	26	of	of	ADP
fuelectenerg-7534	30	27	reference	reference	NOUN
fuelectenerg-7534	30	28	performance	performance	NOUN
fuelectenerg-7534	30	29	to	to	PART
fuelectenerg-7534	30	30	be	be	AUX
fuelectenerg-7534	30	31	pursued	pursue	VERB
fuelectenerg-7534	30	32	,	,	PUNCT
fuelectenerg-7534	30	33	which	which	PRON
fuelectenerg-7534	30	34	is	be	AUX
fuelectenerg-7534	30	35	reported	report	VERB
fuelectenerg-7534	30	36	in	in	ADP
fuelectenerg-7534	30	37	table	table	NOUN
fuelectenerg-7534	30	38	1	1	NUM
fuelectenerg-7534	30	39	.	.	PUNCT
fuelectenerg-7534	30	40	as	as	SCONJ
fuelectenerg-7534	30	41	reported	report	VERB
fuelectenerg-7534	30	42	in	in	ADP
fuelectenerg-7534	30	43	[	[	X
fuelectenerg-7534	30	44	10][11	10][11	PROPN
fuelectenerg-7534	30	45	]	]	PUNCT
fuelectenerg-7534	30	46	,	,	PUNCT
fuelectenerg-7534	30	47	in	in	ADP
fuelectenerg-7534	30	48	the	the	DET
fuelectenerg-7534	30	49	framework	framework	NOUN
fuelectenerg-7534	30	50	of	of	ADP
fuelectenerg-7534	30	51	mems	mem	NOUN
fuelectenerg-7534	30	52	devices	device	NOUN
fuelectenerg-7534	30	53	,	,	PUNCT
fuelectenerg-7534	30	54	this	this	DET
fuelectenerg-7534	30	55	set	set	NOUN
fuelectenerg-7534	30	56	of	of	ADP
fuelectenerg-7534	30	57	reference	reference	NOUN
fuelectenerg-7534	30	58	performance	performance	NOUN
fuelectenerg-7534	30	59	must	must	AUX
fuelectenerg-7534	30	60	be	be	AUX
fuelectenerg-7534	30	61	matched	match	VERB
fuelectenerg-7534	30	62	with	with	ADP
fuelectenerg-7534	30	63	the	the	DET
fuelectenerg-7534	30	64	separate	separate	ADJ
fuelectenerg-7534	30	65	and	and	CCONJ
fuelectenerg-7534	30	66	underlying	underlying	ADJ
fuelectenerg-7534	30	67	issue	issue	NOUN
fuelectenerg-7534	30	68	of	of	ADP
fuelectenerg-7534	30	69	reliability	reliability	NOUN
fuelectenerg-7534	30	70	.	.	PUNCT
fuelectenerg-7534	31	1	the	the	DET
fuelectenerg-7534	31	2	goal	goal	NOUN
fuelectenerg-7534	31	3	of	of	ADP
fuelectenerg-7534	31	4	the	the	DET
fuelectenerg-7534	31	5	present	present	ADJ
fuelectenerg-7534	31	6	work	work	NOUN
fuelectenerg-7534	31	7	is	be	AUX
fuelectenerg-7534	31	8	to	to	PART
fuelectenerg-7534	31	9	provide	provide	VERB
fuelectenerg-7534	31	10	a	a	DET
fuelectenerg-7534	31	11	general	general	ADJ
fuelectenerg-7534	31	12	overview	overview	NOUN
fuelectenerg-7534	31	13	about	about	ADP
fuelectenerg-7534	31	14	the	the	DET
fuelectenerg-7534	31	15	state	state	NOUN
fuelectenerg-7534	31	16	of	of	ADP
fuelectenerg-7534	31	17	the	the	DET
fuelectenerg-7534	31	18	art	art	NOUN
fuelectenerg-7534	31	19	of	of	ADP
fuelectenerg-7534	31	20	some	some	DET
fuelectenerg-7534	31	21	rf	rf	ADJ
fuelectenerg-7534	31	22	-	-	PUNCT
fuelectenerg-7534	31	23	mems	mem	NOUN
fuelectenerg-7534	31	24	devices	device	NOUN
fuelectenerg-7534	31	25	,	,	PUNCT
fuelectenerg-7534	31	26	which	which	PRON
fuelectenerg-7534	31	27	are	be	AUX
fuelectenerg-7534	31	28	considered	consider	VERB
fuelectenerg-7534	31	29	as	as	SCONJ
fuelectenerg-7534	31	30	key	key	ADJ
fuelectenerg-7534	31	31	components	component	NOUN
fuelectenerg-7534	31	32	of	of	ADP
fuelectenerg-7534	31	33	rf	rf	PRON
fuelectenerg-7534	31	34	front	front	NOUN
fuelectenerg-7534	31	35	ends	end	VERB
fuelectenerg-7534	31	36	in	in	ADP
fuelectenerg-7534	31	37	the	the	DET
fuelectenerg-7534	31	38	abovementioned	abovementioned	ADJ
fuelectenerg-7534	31	39	5	5	NUM
fuelectenerg-7534	31	40	g	g	PROPN
fuelectenerg-7534	31	41	scenario	scenario	NOUN
fuelectenerg-7534	31	42	.	.	PUNCT
fuelectenerg-7534	32	1	switches	switch	NOUN
fuelectenerg-7534	32	2	are	be	AUX
fuelectenerg-7534	32	3	taken	take	VERB
fuelectenerg-7534	32	4	into	into	ADP
fuelectenerg-7534	32	5	account	account	NOUN
fuelectenerg-7534	32	6	in	in	ADP
fuelectenerg-7534	32	7	section	section	NOUN
fuelectenerg-7534	32	8	2	2	NUM
fuelectenerg-7534	32	9	as	as	ADP
fuelectenerg-7534	32	10	one	one	NUM
fuelectenerg-7534	32	11	of	of	ADP
fuelectenerg-7534	32	12	a	a	DET
fuelectenerg-7534	32	13	comprehensive	comprehensive	ADJ
fuelectenerg-7534	32	14	overview	overview	NOUN
fuelectenerg-7534	32	15	of	of	ADP
fuelectenerg-7534	32	16	recent	recent	ADJ
fuelectenerg-7534	32	17	developments	development	NOUN
fuelectenerg-7534	32	18	in	in	ADP
fuelectenerg-7534	32	19	rf	rf	ADJ
fuelectenerg-7534	32	20	-	-	PUNCT
fuelectenerg-7534	32	21	mems	mems	ADJ
fuelectenerg-7534	32	22	technology	technology	NOUN
fuelectenerg-7534	32	23	335	335	NUM
fuelectenerg-7534	32	24	the	the	DET
fuelectenerg-7534	32	25	first	first	ADJ
fuelectenerg-7534	32	26	components	component	NOUN
fuelectenerg-7534	32	27	to	to	PART
fuelectenerg-7534	32	28	be	be	AUX
fuelectenerg-7534	32	29	implemented	implement	VERB
fuelectenerg-7534	32	30	by	by	ADP
fuelectenerg-7534	32	31	this	this	DET
fuelectenerg-7534	32	32	technology	technology	NOUN
fuelectenerg-7534	32	33	,	,	PUNCT
fuelectenerg-7534	32	34	and	and	CCONJ
fuelectenerg-7534	32	35	for	for	ADP
fuelectenerg-7534	32	36	their	their	PRON
fuelectenerg-7534	32	37	massive	massive	ADJ
fuelectenerg-7534	32	38	presence	presence	NOUN
fuelectenerg-7534	32	39	in	in	ADP
fuelectenerg-7534	32	40	almost	almost	ADV
fuelectenerg-7534	32	41	every	every	PRON
fuelectenerg-7534	32	42	complex	complex	ADJ
fuelectenerg-7534	32	43	rf	rf	NOUN
fuelectenerg-7534	32	44	-	-	PUNCT
fuelectenerg-7534	32	45	mems	mems	ADJ
fuelectenerg-7534	32	46	and	and	CCONJ
fuelectenerg-7534	32	47	non	non	ADJ
fuelectenerg-7534	32	48	-	-	ADJ
fuelectenerg-7534	32	49	rf	rf	ADJ
fuelectenerg-7534	32	50	-	-	PUNCT
fuelectenerg-7534	32	51	mems	mems	ADJ
fuelectenerg-7534	32	52	device	device	NOUN
fuelectenerg-7534	32	53	.	.	PUNCT
fuelectenerg-7534	33	1	the	the	DET
fuelectenerg-7534	33	2	section	section	NOUN
fuelectenerg-7534	33	3	is	be	AUX
fuelectenerg-7534	33	4	complemented	complement	VERB
fuelectenerg-7534	33	5	by	by	ADP
fuelectenerg-7534	33	6	a	a	DET
fuelectenerg-7534	33	7	set	set	NOUN
fuelectenerg-7534	33	8	of	of	ADP
fuelectenerg-7534	33	9	common	common	ADJ
fuelectenerg-7534	33	10	guidelines	guideline	NOUN
fuelectenerg-7534	33	11	for	for	ADP
fuelectenerg-7534	33	12	an	an	DET
fuelectenerg-7534	33	13	optimal	optimal	ADJ
fuelectenerg-7534	33	14	design	design	NOUN
fuelectenerg-7534	33	15	of	of	ADP
fuelectenerg-7534	33	16	rf	rf	ADJ
fuelectenerg-7534	33	17	-	-	PUNCT
fuelectenerg-7534	33	18	mems	mems	ADJ
fuelectenerg-7534	33	19	switches	switch	NOUN
fuelectenerg-7534	33	20	.	.	PUNCT
fuelectenerg-7534	34	1	packaging	packaging	NOUN
fuelectenerg-7534	34	2	is	be	AUX
fuelectenerg-7534	34	3	considered	consider	VERB
fuelectenerg-7534	34	4	in	in	ADP
fuelectenerg-7534	34	5	section	section	NOUN
fuelectenerg-7534	34	6	3	3	NUM
fuelectenerg-7534	34	7	as	as	ADP
fuelectenerg-7534	34	8	a	a	DET
fuelectenerg-7534	34	9	critical	critical	ADJ
fuelectenerg-7534	34	10	step	step	NOUN
fuelectenerg-7534	34	11	to	to	PART
fuelectenerg-7534	34	12	enhance	enhance	VERB
fuelectenerg-7534	34	13	reliability	reliability	NOUN
fuelectenerg-7534	34	14	,	,	PUNCT
fuelectenerg-7534	34	15	and	and	CCONJ
fuelectenerg-7534	34	16	to	to	PART
fuelectenerg-7534	34	17	guarantee	guarantee	VERB
fuelectenerg-7534	34	18	the	the	DET
fuelectenerg-7534	34	19	practical	practical	ADJ
fuelectenerg-7534	34	20	integration	integration	NOUN
fuelectenerg-7534	34	21	of	of	ADP
fuelectenerg-7534	34	22	such	such	ADJ
fuelectenerg-7534	34	23	devices	device	NOUN
fuelectenerg-7534	34	24	on	on	ADP
fuelectenerg-7534	34	25	common	common	ADJ
fuelectenerg-7534	34	26	platforms	platform	NOUN
fuelectenerg-7534	34	27	.	.	PUNCT
fuelectenerg-7534	35	1	since	since	SCONJ
fuelectenerg-7534	35	2	beam	beam	NOUN
fuelectenerg-7534	35	3	forming	form	VERB
fuelectenerg-7534	35	4	techniques	technique	NOUN
fuelectenerg-7534	35	5	are	be	AUX
fuelectenerg-7534	35	6	basically	basically	ADV
fuelectenerg-7534	35	7	performed	perform	VERB
fuelectenerg-7534	35	8	by	by	ADP
fuelectenerg-7534	35	9	attenuating	attenuate	VERB
fuelectenerg-7534	35	10	and	and	CCONJ
fuelectenerg-7534	35	11	phase	phase	NOUN
fuelectenerg-7534	35	12	-	-	PUNCT
fuelectenerg-7534	35	13	shifting	shift	VERB
fuelectenerg-7534	35	14	the	the	DET
fuelectenerg-7534	35	15	signal	signal	NOUN
fuelectenerg-7534	35	16	feeding	feed	VERB
fuelectenerg-7534	35	17	a	a	DET
fuelectenerg-7534	35	18	radiating	radiating	NOUN
fuelectenerg-7534	35	19	element	element	NOUN
fuelectenerg-7534	35	20	,	,	PUNCT
fuelectenerg-7534	35	21	phase	phase	NOUN
fuelectenerg-7534	35	22	shifters	shifter	NOUN
fuelectenerg-7534	35	23	are	be	AUX
fuelectenerg-7534	35	24	discussed	discuss	VERB
fuelectenerg-7534	35	25	in	in	ADP
fuelectenerg-7534	35	26	section	section	NOUN
fuelectenerg-7534	35	27	4	4	NUM
fuelectenerg-7534	35	28	,	,	PUNCT
fuelectenerg-7534	35	29	including	include	VERB
fuelectenerg-7534	35	30	their	their	PRON
fuelectenerg-7534	35	31	most	most	ADV
fuelectenerg-7534	35	32	common	common	ADJ
fuelectenerg-7534	35	33	architectures	architecture	NOUN
fuelectenerg-7534	35	34	.	.	PUNCT
fuelectenerg-7534	36	1	for	for	ADP
fuelectenerg-7534	36	2	the	the	DET
fuelectenerg-7534	36	3	same	same	ADJ
fuelectenerg-7534	36	4	reason	reason	NOUN
fuelectenerg-7534	36	5	,	,	PUNCT
fuelectenerg-7534	36	6	attenuators	attenuator	NOUN
fuelectenerg-7534	36	7	are	be	AUX
fuelectenerg-7534	36	8	treated	treat	VERB
fuelectenerg-7534	36	9	in	in	ADP
fuelectenerg-7534	36	10	section	section	NOUN
fuelectenerg-7534	36	11	5	5	NUM
fuelectenerg-7534	36	12	.	.	PUNCT
fuelectenerg-7534	37	1	as	as	ADP
fuelectenerg-7534	37	2	critical	critical	ADJ
fuelectenerg-7534	37	3	components	component	NOUN
fuelectenerg-7534	37	4	in	in	ADP
fuelectenerg-7534	37	5	every	every	DET
fuelectenerg-7534	37	6	rf	rf	ADJ
fuelectenerg-7534	37	7	front	front	ADJ
fuelectenerg-7534	37	8	end	end	NOUN
fuelectenerg-7534	37	9	,	,	PUNCT
fuelectenerg-7534	37	10	filters	filter	NOUN
fuelectenerg-7534	37	11	are	be	AUX
fuelectenerg-7534	37	12	treated	treat	VERB
fuelectenerg-7534	37	13	in	in	ADP
fuelectenerg-7534	37	14	section	section	NOUN
fuelectenerg-7534	37	15	6	6	NUM
fuelectenerg-7534	37	16	.	.	PUNCT
fuelectenerg-7534	38	1	these	these	DET
fuelectenerg-7534	38	2	different	different	ADJ
fuelectenerg-7534	38	3	topics	topic	NOUN
fuelectenerg-7534	38	4	are	be	AUX
fuelectenerg-7534	38	5	presented	present	VERB
fuelectenerg-7534	38	6	by	by	ADP
fuelectenerg-7534	38	7	explaining	explain	VERB
fuelectenerg-7534	38	8	their	their	PRON
fuelectenerg-7534	38	9	basic	basic	ADJ
fuelectenerg-7534	38	10	working	work	VERB
fuelectenerg-7534	38	11	principles	principle	NOUN
fuelectenerg-7534	38	12	,	,	PUNCT
fuelectenerg-7534	38	13	and	and	CCONJ
fuelectenerg-7534	38	14	examining	examine	VERB
fuelectenerg-7534	38	15	several	several	ADJ
fuelectenerg-7534	38	16	research	research	NOUN
fuelectenerg-7534	38	17	contributions	contribution	NOUN
fuelectenerg-7534	38	18	available	available	ADJ
fuelectenerg-7534	38	19	in	in	ADP
fuelectenerg-7534	38	20	the	the	DET
fuelectenerg-7534	38	21	scientific	scientific	ADJ
fuelectenerg-7534	38	22	literature	literature	NOUN
fuelectenerg-7534	38	23	.	.	PUNCT
fuelectenerg-7534	39	1	table	table	NOUN
fuelectenerg-7534	39	2	1	1	NUM
fuelectenerg-7534	39	3	desirable	desirable	ADJ
fuelectenerg-7534	39	4	characteristic	characteristic	ADJ
fuelectenerg-7534	39	5	features	feature	NOUN
fuelectenerg-7534	39	6	for	for	ADP
fuelectenerg-7534	39	7	devices	device	NOUN
fuelectenerg-7534	39	8	operating	operate	VERB
fuelectenerg-7534	39	9	in	in	ADP
fuelectenerg-7534	39	10	5	5	NUM
fuelectenerg-7534	39	11	g	g	NOUN
fuelectenerg-7534	39	12	network	network	NOUN
fuelectenerg-7534	39	13	.	.	PUNCT
fuelectenerg-7534	40	1	feature	feature	NOUN
fuelectenerg-7534	40	2	desired	desire	VERB
fuelectenerg-7534	40	3	value	value	NOUN
fuelectenerg-7534	40	4	motivation	motivation	NOUN
fuelectenerg-7534	40	5	frequency	frequency	NOUN
fuelectenerg-7534	40	6	range	range	NOUN
fuelectenerg-7534	40	7	<	<	X
fuelectenerg-7534	40	8	6	6	NUM
fuelectenerg-7534	40	9	&	&	CCONJ
fuelectenerg-7534	40	10	(	(	PUNCT
fuelectenerg-7534	40	11	24.25	24.25	NUM
fuelectenerg-7534	40	12	-	-	SYM
fuelectenerg-7534	40	13	71	71	NUM
fuelectenerg-7534	40	14	)	)	PUNCT
fuelectenerg-7534	40	15	ghz	ghz	NOUN
fuelectenerg-7534	40	16	the	the	DET
fuelectenerg-7534	40	17	diversification	diversification	NOUN
fuelectenerg-7534	40	18	of	of	ADP
fuelectenerg-7534	40	19	the	the	DET
fuelectenerg-7534	40	20	infrastructure	infrastructure	NOUN
fuelectenerg-7534	40	21	imposes	impose	VERB
fuelectenerg-7534	40	22	such	such	ADJ
fuelectenerg-7534	40	23	wide	wide	ADJ
fuelectenerg-7534	40	24	range	range	NOUN
fuelectenerg-7534	40	25	.	.	PUNCT
fuelectenerg-7534	41	1	mobile	mobile	ADJ
fuelectenerg-7534	41	2	terminals	terminal	NOUN
fuelectenerg-7534	41	3	will	will	AUX
fuelectenerg-7534	41	4	have	have	VERB
fuelectenerg-7534	41	5	to	to	PART
fuelectenerg-7534	41	6	operate	operate	VERB
fuelectenerg-7534	41	7	correctly	correctly	ADV
fuelectenerg-7534	41	8	when	when	SCONJ
fuelectenerg-7534	41	9	connected	connect	VERB
fuelectenerg-7534	41	10	to	to	ADP
fuelectenerg-7534	41	11	base	base	NOUN
fuelectenerg-7534	41	12	stations	station	NOUN
fuelectenerg-7534	41	13	or	or	CCONJ
fuelectenerg-7534	41	14	cells	cell	NOUN
fuelectenerg-7534	41	15	.	.	PUNCT
fuelectenerg-7534	42	1	isolation	isolation	NOUN
fuelectenerg-7534	42	2	>	>	PUNCT
fuelectenerg-7534	42	3	-30	-30	PUNCT
fuelectenerg-7534	42	4	or	or	CCONJ
fuelectenerg-7534	42	5	-40	-40	PROPN
fuelectenerg-7534	42	6	db	db	PROPN
fuelectenerg-7534	42	7	a	a	DET
fuelectenerg-7534	42	8	crucial	crucial	ADJ
fuelectenerg-7534	42	9	feature	feature	NOUN
fuelectenerg-7534	42	10	in	in	ADP
fuelectenerg-7534	42	11	reconfigurable	reconfigurable	ADJ
fuelectenerg-7534	42	12	switchbased	switchbase	VERB
fuelectenerg-7534	42	13	passives	passive	NOUN
fuelectenerg-7534	42	14	,	,	PUNCT
fuelectenerg-7534	42	15	it	it	PRON
fuelectenerg-7534	42	16	should	should	AUX
fuelectenerg-7534	42	17	be	be	AUX
fuelectenerg-7534	42	18	as	as	ADV
fuelectenerg-7534	42	19	high	high	ADJ
fuelectenerg-7534	42	20	as	as	ADP
fuelectenerg-7534	42	21	possible	possible	ADJ
fuelectenerg-7534	42	22	.	.	PUNCT
fuelectenerg-7534	43	1	loss	loss	NOUN
fuelectenerg-7534	43	2	<	<	X
fuelectenerg-7534	43	3	-1	-1	PUNCT
fuelectenerg-7534	43	4	db	db	AUX
fuelectenerg-7534	43	5	given	give	VERB
fuelectenerg-7534	43	6	the	the	DET
fuelectenerg-7534	43	7	multiple	multiple	ADJ
fuelectenerg-7534	43	8	components	component	NOUN
fuelectenerg-7534	43	9	housed	house	VERB
fuelectenerg-7534	43	10	in	in	ADP
fuelectenerg-7534	43	11	common	common	ADJ
fuelectenerg-7534	43	12	rf	rf	ADJ
fuelectenerg-7534	43	13	front	front	NOUN
fuelectenerg-7534	43	14	ends	end	VERB
fuelectenerg-7534	43	15	,	,	PUNCT
fuelectenerg-7534	43	16	single	single	ADJ
fuelectenerg-7534	43	17	losses	loss	NOUN
fuelectenerg-7534	43	18	should	should	AUX
fuelectenerg-7534	43	19	be	be	AUX
fuelectenerg-7534	43	20	minimized	minimize	VERB
fuelectenerg-7534	43	21	along	along	ADP
fuelectenerg-7534	43	22	the	the	DET
fuelectenerg-7534	43	23	widest	wide	ADJ
fuelectenerg-7534	43	24	achievable	achievable	ADJ
fuelectenerg-7534	43	25	frequency	frequency	NOUN
fuelectenerg-7534	43	26	span	span	NOUN
fuelectenerg-7534	43	27	.	.	PUNCT
fuelectenerg-7534	44	1	cross	cross	ADJ
fuelectenerg-7534	44	2	-	-	NOUN
fuelectenerg-7534	44	3	talk	talk	ADJ
fuelectenerg-7534	44	4	<	<	X
fuelectenerg-7534	44	5	-50	-50	PUNCT
fuelectenerg-7534	44	6	or	or	CCONJ
fuelectenerg-7534	44	7	-60	-60	NUM
fuelectenerg-7534	44	8	db	db	PROPN
fuelectenerg-7534	44	9	presence	presence	NOUN
fuelectenerg-7534	44	10	of	of	ADP
fuelectenerg-7534	44	11	mimo	mimo	PROPN
fuelectenerg-7534	44	12	systems	system	NOUN
fuelectenerg-7534	44	13	and	and	CCONJ
fuelectenerg-7534	44	14	closely	closely	ADV
fuelectenerg-7534	44	15	spaced	spaced	ADJ
fuelectenerg-7534	44	16	components	component	NOUN
fuelectenerg-7534	44	17	prescribes	prescribe	VERB
fuelectenerg-7534	44	18	maximum	maximum	ADJ
fuelectenerg-7534	44	19	isolation	isolation	NOUN
fuelectenerg-7534	44	20	between	between	ADP
fuelectenerg-7534	44	21	adjacent	adjacent	ADJ
fuelectenerg-7534	44	22	channels	channel	NOUN
fuelectenerg-7534	44	23	.	.	PUNCT
fuelectenerg-7534	45	1	switching	switch	VERB
fuelectenerg-7534	45	2	time	time	NOUN
fuelectenerg-7534	45	3	<	<	X
fuelectenerg-7534	45	4	200	200	NUM
fuelectenerg-7534	45	5	or	or	CCONJ
fuelectenerg-7534	45	6	300	300	NUM
fuelectenerg-7534	45	7	µs	µs	ADP
fuelectenerg-7534	45	8	the	the	DET
fuelectenerg-7534	45	9	low	low	ADJ
fuelectenerg-7534	45	10	latency	latency	NOUN
fuelectenerg-7534	45	11	required	require	VERB
fuelectenerg-7534	45	12	by	by	ADP
fuelectenerg-7534	45	13	the	the	DET
fuelectenerg-7534	45	14	diversified	diversify	VERB
fuelectenerg-7534	45	15	network	network	NOUN
fuelectenerg-7534	45	16	requires	require	VERB
fuelectenerg-7534	45	17	fast	fast	ADJ
fuelectenerg-7534	45	18	commutation	commutation	NOUN
fuelectenerg-7534	45	19	of	of	ADP
fuelectenerg-7534	45	20	switching	switch	VERB
fuelectenerg-7534	45	21	devices	device	NOUN
fuelectenerg-7534	45	22	.	.	PUNCT
fuelectenerg-7534	46	1	control	control	NOUN
fuelectenerg-7534	46	2	voltage	voltage	NOUN
fuelectenerg-7534	46	3	<	<	X
fuelectenerg-7534	46	4	2	2	NUM
fuelectenerg-7534	46	5	v	v	NOUN
fuelectenerg-7534	46	6	compliance	compliance	NOUN
fuelectenerg-7534	46	7	with	with	ADP
fuelectenerg-7534	46	8	typical	typical	ADJ
fuelectenerg-7534	46	9	bias	bias	NOUN
fuelectenerg-7534	46	10	voltages	voltage	NOUN
fuelectenerg-7534	46	11	of	of	ADP
fuelectenerg-7534	46	12	circuits	circuit	NOUN
fuelectenerg-7534	46	13	and	and	CCONJ
fuelectenerg-7534	46	14	avoidance	avoidance	NOUN
fuelectenerg-7534	46	15	of	of	ADP
fuelectenerg-7534	46	16	ad	ad	X
fuelectenerg-7534	46	17	hoc	hoc	X
fuelectenerg-7534	46	18	additional	additional	ADJ
fuelectenerg-7534	46	19	circuitry	circuitry	NOUN
fuelectenerg-7534	46	20	in	in	ADP
fuelectenerg-7534	46	21	mobile	mobile	ADJ
fuelectenerg-7534	46	22	devices	device	NOUN
fuelectenerg-7534	46	23	.	.	PUNCT
fuelectenerg-7534	47	1	2	2	X
fuelectenerg-7534	47	2	.	.	X
fuelectenerg-7534	47	3	switches	switch	NOUN
fuelectenerg-7534	47	4	rf	rf	NOUN
fuelectenerg-7534	47	5	-	-	PUNCT
fuelectenerg-7534	47	6	mems	mem	NOUN
fuelectenerg-7534	47	7	based	base	VERB
fuelectenerg-7534	47	8	switches	switch	NOUN
fuelectenerg-7534	47	9	represent	represent	VERB
fuelectenerg-7534	47	10	one	one	NUM
fuelectenerg-7534	47	11	of	of	ADP
fuelectenerg-7534	47	12	the	the	DET
fuelectenerg-7534	47	13	early	early	ADJ
fuelectenerg-7534	47	14	and	and	CCONJ
fuelectenerg-7534	47	15	principal	principal	ADJ
fuelectenerg-7534	47	16	components	component	NOUN
fuelectenerg-7534	47	17	in	in	ADP
fuelectenerg-7534	47	18	this	this	DET
fuelectenerg-7534	47	19	field	field	NOUN
fuelectenerg-7534	47	20	of	of	ADP
fuelectenerg-7534	47	21	research	research	NOUN
fuelectenerg-7534	47	22	.	.	PUNCT
fuelectenerg-7534	48	1	they	they	PRON
fuelectenerg-7534	48	2	have	have	AUX
fuelectenerg-7534	48	3	been	be	AUX
fuelectenerg-7534	48	4	investigated	investigate	VERB
fuelectenerg-7534	48	5	since	since	SCONJ
fuelectenerg-7534	48	6	the	the	DET
fuelectenerg-7534	48	7	second	second	ADJ
fuelectenerg-7534	48	8	half	half	NOUN
fuelectenerg-7534	48	9	of	of	ADP
fuelectenerg-7534	48	10	1990s	1990	NOUN
fuelectenerg-7534	48	11	and	and	CCONJ
fuelectenerg-7534	48	12	they	they	PRON
fuelectenerg-7534	48	13	are	be	AUX
fuelectenerg-7534	48	14	part	part	NOUN
fuelectenerg-7534	48	15	of	of	ADP
fuelectenerg-7534	48	16	almost	almost	ADV
fuelectenerg-7534	48	17	all	all	PRON
fuelectenerg-7534	48	18	complex	complex	ADJ
fuelectenerg-7534	48	19	networks	network	NOUN
fuelectenerg-7534	48	20	and	and	CCONJ
fuelectenerg-7534	48	21	devices	device	NOUN
fuelectenerg-7534	48	22	implemented	implement	VERB
fuelectenerg-7534	48	23	in	in	ADP
fuelectenerg-7534	48	24	such	such	DET
fuelectenerg-7534	48	25	a	a	DET
fuelectenerg-7534	48	26	technology	technology	NOUN
fuelectenerg-7534	48	27	.	.	PUNCT
fuelectenerg-7534	49	1	in	in	ADP
fuelectenerg-7534	49	2	order	order	NOUN
fuelectenerg-7534	49	3	to	to	PART
fuelectenerg-7534	49	4	play	play	VERB
fuelectenerg-7534	49	5	a	a	DET
fuelectenerg-7534	49	6	prominent	prominent	ADJ
fuelectenerg-7534	49	7	role	role	NOUN
fuelectenerg-7534	49	8	in	in	ADP
fuelectenerg-7534	49	9	the	the	DET
fuelectenerg-7534	49	10	current	current	ADJ
fuelectenerg-7534	49	11	5	5	NUM
fuelectenerg-7534	49	12	g	g	NOUN
fuelectenerg-7534	49	13	paradigm	paradigm	NOUN
fuelectenerg-7534	49	14	,	,	PUNCT
fuelectenerg-7534	49	15	switches	switch	NOUN
fuelectenerg-7534	49	16	have	have	VERB
fuelectenerg-7534	49	17	to	to	PART
fuelectenerg-7534	49	18	comply	comply	VERB
fuelectenerg-7534	49	19	with	with	ADP
fuelectenerg-7534	49	20	the	the	DET
fuelectenerg-7534	49	21	specific	specific	ADJ
fuelectenerg-7534	49	22	requirements	requirement	NOUN
fuelectenerg-7534	49	23	reported	report	VERB
fuelectenerg-7534	49	24	in	in	ADP
fuelectenerg-7534	49	25	table	table	NOUN
fuelectenerg-7534	49	26	1	1	NUM
fuelectenerg-7534	49	27	,	,	PUNCT
fuelectenerg-7534	49	28	together	together	ADV
fuelectenerg-7534	49	29	with	with	ADP
fuelectenerg-7534	49	30	a	a	DET
fuelectenerg-7534	49	31	satisfying	satisfying	ADJ
fuelectenerg-7534	49	32	reliability	reliability	NOUN
fuelectenerg-7534	49	33	,	,	PUNCT
fuelectenerg-7534	49	34	which	which	PRON
fuelectenerg-7534	49	35	should	should	AUX
fuelectenerg-7534	49	36	be	be	AUX
fuelectenerg-7534	49	37	greater	great	ADJ
fuelectenerg-7534	49	38	than	than	ADP
fuelectenerg-7534	49	39	one	one	NUM
fuelectenerg-7534	49	40	billion	billion	NUM
fuelectenerg-7534	49	41	cycles	cycle	NOUN
fuelectenerg-7534	49	42	in	in	ADP
fuelectenerg-7534	49	43	some	some	DET
fuelectenerg-7534	49	44	applications	application	NOUN
fuelectenerg-7534	49	45	.	.	PUNCT
fuelectenerg-7534	50	1	many	many	ADJ
fuelectenerg-7534	50	2	valuable	valuable	ADJ
fuelectenerg-7534	50	3	research	research	NOUN
fuelectenerg-7534	50	4	solutions	solution	NOUN
fuelectenerg-7534	50	5	addressed	address	VERB
fuelectenerg-7534	50	6	the	the	DET
fuelectenerg-7534	50	7	above	above	ADV
fuelectenerg-7534	50	8	-	-	PUNCT
fuelectenerg-7534	50	9	mentioned	mention	VERB
fuelectenerg-7534	50	10	requirements	requirement	NOUN
fuelectenerg-7534	50	11	in	in	ADP
fuelectenerg-7534	50	12	the	the	DET
fuelectenerg-7534	50	13	last	last	ADJ
fuelectenerg-7534	50	14	years	year	NOUN
fuelectenerg-7534	50	15	,	,	PUNCT
fuelectenerg-7534	50	16	although	although	SCONJ
fuelectenerg-7534	50	17	trade	trade	NOUN
fuelectenerg-7534	50	18	-	-	PUNCT
fuelectenerg-7534	50	19	offs	off	NOUN
fuelectenerg-7534	50	20	are	be	AUX
fuelectenerg-7534	50	21	generally	generally	ADV
fuelectenerg-7534	50	22	needed	need	VERB
fuelectenerg-7534	50	23	between	between	ADP
fuelectenerg-7534	50	24	electrical	electrical	ADJ
fuelectenerg-7534	50	25	and	and	CCONJ
fuelectenerg-7534	50	26	mechanical	mechanical	ADJ
fuelectenerg-7534	50	27	performances	performance	NOUN
fuelectenerg-7534	50	28	.	.	PUNCT
fuelectenerg-7534	51	1	from	from	ADP
fuelectenerg-7534	51	2	the	the	DET
fuelectenerg-7534	51	3	point	point	NOUN
fuelectenerg-7534	51	4	of	of	ADP
fuelectenerg-7534	51	5	view	view	NOUN
fuelectenerg-7534	51	6	of	of	ADP
fuelectenerg-7534	51	7	classification	classification	NOUN
fuelectenerg-7534	51	8	,	,	PUNCT
fuelectenerg-7534	51	9	the	the	DET
fuelectenerg-7534	51	10	movable	movable	ADJ
fuelectenerg-7534	51	11	membrane	membrane	NOUN
fuelectenerg-7534	51	12	allowing	allow	VERB
fuelectenerg-7534	51	13	or	or	CCONJ
fuelectenerg-7534	51	14	avoiding	avoid	VERB
fuelectenerg-7534	51	15	the	the	DET
fuelectenerg-7534	51	16	electrical	electrical	ADJ
fuelectenerg-7534	51	17	connection	connection	NOUN
fuelectenerg-7534	51	18	of	of	ADP
fuelectenerg-7534	51	19	the	the	DET
fuelectenerg-7534	51	20	signal	signal	ADJ
fuelectenerg-7534	51	21	line	line	NOUN
fuelectenerg-7534	51	22	to	to	ADP
fuelectenerg-7534	51	23	the	the	DET
fuelectenerg-7534	51	24	output	output	NOUN
fuelectenerg-7534	51	25	port	port	NOUN
fuelectenerg-7534	51	26	,	,	PUNCT
fuelectenerg-7534	51	27	or	or	CCONJ
fuelectenerg-7534	51	28	to	to	ADP
fuelectenerg-7534	51	29	rf	rf	NOUN
fuelectenerg-7534	51	30	ground	ground	NOUN
fuelectenerg-7534	51	31	,	,	PUNCT
fuelectenerg-7534	51	32	may	may	AUX
fuelectenerg-7534	51	33	realize	realize	VERB
fuelectenerg-7534	51	34	a	a	DET
fuelectenerg-7534	51	35	ohmic	ohmic	ADJ
fuelectenerg-7534	51	36	(	(	PUNCT
fuelectenerg-7534	51	37	metal	metal	NOUN
fuelectenerg-7534	51	38	-	-	PUNCT
fuelectenerg-7534	51	39	metal	metal	NOUN
fuelectenerg-7534	51	40	)	)	PUNCT
fuelectenerg-7534	51	41	or	or	CCONJ
fuelectenerg-7534	51	42	capacitive	capacitive	ADJ
fuelectenerg-7534	51	43	(	(	PUNCT
fuelectenerg-7534	51	44	metal	metal	NOUN
fuelectenerg-7534	51	45	-	-	PUNCT
fuelectenerg-7534	51	46	dielectric	dielectric	NOUN
fuelectenerg-7534	51	47	)	)	PUNCT
fuelectenerg-7534	51	48	contact	contact	NOUN
fuelectenerg-7534	51	49	;	;	PUNCT
fuelectenerg-7534	51	50	on	on	ADP
fuelectenerg-7534	51	51	the	the	DET
fuelectenerg-7534	51	52	basis	basis	NOUN
fuelectenerg-7534	51	53	of	of	ADP
fuelectenerg-7534	51	54	the	the	DET
fuelectenerg-7534	51	55	contact	contact	NOUN
fuelectenerg-7534	51	56	,	,	PUNCT
fuelectenerg-7534	51	57	the	the	DET
fuelectenerg-7534	51	58	switch	switch	NOUN
fuelectenerg-7534	51	59	will	will	AUX
fuelectenerg-7534	51	60	be	be	AUX
fuelectenerg-7534	51	61	ohmic	ohmic	ADJ
fuelectenerg-7534	51	62	or	or	CCONJ
fuelectenerg-7534	51	63	capacitive	capacitive	ADJ
fuelectenerg-7534	51	64	.	.	PUNCT
fuelectenerg-7534	52	1	the	the	DET
fuelectenerg-7534	52	2	target	target	NOUN
fuelectenerg-7534	52	3	of	of	ADP
fuelectenerg-7534	52	4	the	the	DET
fuelectenerg-7534	52	5	connection	connection	NOUN
fuelectenerg-7534	52	6	(	(	PUNCT
fuelectenerg-7534	52	7	signal	signal	ADJ
fuelectenerg-7534	52	8	line	line	NOUN
fuelectenerg-7534	52	9	or	or	CCONJ
fuelectenerg-7534	52	10	ground	ground	NOUN
fuelectenerg-7534	52	11	)	)	PUNCT
fuelectenerg-7534	52	12	determines	determine	VERB
fuelectenerg-7534	52	13	the	the	DET
fuelectenerg-7534	52	14	series	series	NOUN
fuelectenerg-7534	52	15	or	or	CCONJ
fuelectenerg-7534	52	16	shunt	shunt	VERB
fuelectenerg-7534	52	17	nature	nature	NOUN
fuelectenerg-7534	52	18	of	of	ADP
fuelectenerg-7534	52	19	the	the	DET
fuelectenerg-7534	52	20	device	device	NOUN
fuelectenerg-7534	52	21	;	;	PUNCT
fuelectenerg-7534	52	22	hybrid	hybrid	ADJ
fuelectenerg-7534	52	23	series	series	NOUN
fuelectenerg-7534	52	24	-	-	PUNCT
fuelectenerg-7534	52	25	shunt	shunt	NOUN
fuelectenerg-7534	52	26	implementations	implementation	NOUN
fuelectenerg-7534	52	27	are	be	AUX
fuelectenerg-7534	52	28	also	also	ADV
fuelectenerg-7534	52	29	achievable	achievable	ADJ
fuelectenerg-7534	52	30	by	by	ADP
fuelectenerg-7534	52	31	particular	particular	ADJ
fuelectenerg-7534	52	32	arrangements	arrangement	NOUN
fuelectenerg-7534	52	33	[	[	X
fuelectenerg-7534	52	34	12	12	NUM
fuelectenerg-7534	52	35	]	]	PUNCT
fuelectenerg-7534	52	36	.	.	PUNCT
fuelectenerg-7534	53	1	the	the	DET
fuelectenerg-7534	53	2	membrane	membrane	NOUN
fuelectenerg-7534	53	3	may	may	AUX
fuelectenerg-7534	53	4	move	move	VERB
fuelectenerg-7534	53	5	vertically	vertically	ADV
fuelectenerg-7534	53	6	or	or	CCONJ
fuelectenerg-7534	53	7	336	336	NUM
fuelectenerg-7534	53	8	g.	g.	NOUN
fuelectenerg-7534	53	9	tagliapietra	tagliapietra	PROPN
fuelectenerg-7534	53	10	,	,	PUNCT
fuelectenerg-7534	53	11	j.	j.	PROPN
fuelectenerg-7534	53	12	iannacci	iannacci	PROPN
fuelectenerg-7534	53	13	horizontally	horizontally	ADV
fuelectenerg-7534	53	14	,	,	PUNCT
fuelectenerg-7534	53	15	while	while	SCONJ
fuelectenerg-7534	53	16	its	its	PRON
fuelectenerg-7534	53	17	structure	structure	NOUN
fuelectenerg-7534	53	18	may	may	AUX
fuelectenerg-7534	53	19	be	be	AUX
fuelectenerg-7534	53	20	based	base	VERB
fuelectenerg-7534	53	21	on	on	ADP
fuelectenerg-7534	53	22	a	a	DET
fuelectenerg-7534	53	23	cantilever	cantilever	NOUN
fuelectenerg-7534	53	24	or	or	CCONJ
fuelectenerg-7534	53	25	a	a	DET
fuelectenerg-7534	53	26	clamped	clamp	VERB
fuelectenerg-7534	53	27	-	-	PUNCT
fuelectenerg-7534	53	28	clamped	clamp	VERB
fuelectenerg-7534	53	29	type	type	NOUN
fuelectenerg-7534	53	30	,	,	PUNCT
fuelectenerg-7534	53	31	employing	employ	VERB
fuelectenerg-7534	53	32	different	different	ADJ
fuelectenerg-7534	53	33	shapes	shape	NOUN
fuelectenerg-7534	53	34	of	of	ADP
fuelectenerg-7534	53	35	beams	beam	NOUN
fuelectenerg-7534	53	36	and	and	CCONJ
fuelectenerg-7534	53	37	membranes	membrane	NOUN
fuelectenerg-7534	53	38	.	.	PUNCT
fuelectenerg-7534	54	1	actuation	actuation	NOUN
fuelectenerg-7534	54	2	may	may	AUX
fuelectenerg-7534	54	3	take	take	VERB
fuelectenerg-7534	54	4	place	place	NOUN
fuelectenerg-7534	54	5	by	by	ADP
fuelectenerg-7534	54	6	piezoelectric	piezoelectric	NOUN
fuelectenerg-7534	54	7	,	,	PUNCT
fuelectenerg-7534	54	8	electrothermal	electrothermal	ADJ
fuelectenerg-7534	54	9	,	,	PUNCT
fuelectenerg-7534	54	10	electromagnetic	electromagnetic	ADJ
fuelectenerg-7534	54	11	or	or	CCONJ
fuelectenerg-7534	54	12	electrostatic	electrostatic	ADJ
fuelectenerg-7534	54	13	transduction	transduction	NOUN
fuelectenerg-7534	54	14	mechanism	mechanism	NOUN
fuelectenerg-7534	54	15	,	,	PUNCT
fuelectenerg-7534	54	16	with	with	ADP
fuelectenerg-7534	54	17	the	the	DET
fuelectenerg-7534	54	18	last	last	ADJ
fuelectenerg-7534	54	19	one	one	NOUN
fuelectenerg-7534	54	20	being	be	AUX
fuelectenerg-7534	54	21	the	the	DET
fuelectenerg-7534	54	22	most	most	ADV
fuelectenerg-7534	54	23	widely	widely	ADV
fuelectenerg-7534	54	24	employed	employ	VERB
fuelectenerg-7534	54	25	.	.	PUNCT
fuelectenerg-7534	55	1	from	from	ADP
fuelectenerg-7534	55	2	a	a	DET
fuelectenerg-7534	55	3	practical	practical	ADJ
fuelectenerg-7534	55	4	point	point	NOUN
fuelectenerg-7534	55	5	of	of	ADP
fuelectenerg-7534	55	6	view	view	NOUN
fuelectenerg-7534	55	7	,	,	PUNCT
fuelectenerg-7534	55	8	isolation	isolation	NOUN
fuelectenerg-7534	55	9	performances	performance	NOUN
fuelectenerg-7534	55	10	of	of	ADP
fuelectenerg-7534	55	11	ohmic	ohmic	ADJ
fuelectenerg-7534	55	12	switches	switch	NOUN
fuelectenerg-7534	55	13	are	be	AUX
fuelectenerg-7534	55	14	quite	quite	ADV
fuelectenerg-7534	55	15	broadband	broadband	NOUN
fuelectenerg-7534	55	16	,	,	PUNCT
fuelectenerg-7534	55	17	limited	limit	VERB
fuelectenerg-7534	55	18	only	only	ADV
fuelectenerg-7534	55	19	by	by	ADP
fuelectenerg-7534	55	20	the	the	DET
fuelectenerg-7534	55	21	capacitance	capacitance	NOUN
fuelectenerg-7534	55	22	between	between	ADP
fuelectenerg-7534	55	23	the	the	DET
fuelectenerg-7534	55	24	movable	movable	ADJ
fuelectenerg-7534	55	25	membrane	membrane	NOUN
fuelectenerg-7534	55	26	and	and	CCONJ
fuelectenerg-7534	55	27	the	the	DET
fuelectenerg-7534	55	28	signal	signal	ADJ
fuelectenerg-7534	55	29	line	line	NOUN
fuelectenerg-7534	55	30	,	,	PUNCT
fuelectenerg-7534	55	31	when	when	SCONJ
fuelectenerg-7534	55	32	the	the	DET
fuelectenerg-7534	55	33	membrane	membrane	NOUN
fuelectenerg-7534	55	34	is	be	AUX
fuelectenerg-7534	55	35	not	not	PART
fuelectenerg-7534	55	36	actuated	actuate	VERB
fuelectenerg-7534	55	37	.	.	PUNCT
fuelectenerg-7534	56	1	this	this	DET
fuelectenerg-7534	56	2	capacitance	capacitance	NOUN
fuelectenerg-7534	56	3	determines	determine	VERB
fuelectenerg-7534	56	4	a	a	DET
fuelectenerg-7534	56	5	decreased	decreased	ADJ
fuelectenerg-7534	56	6	impedance	impedance	NOUN
fuelectenerg-7534	56	7	as	as	ADP
fuelectenerg-7534	56	8	frequency	frequency	NOUN
fuelectenerg-7534	56	9	increases	increase	NOUN
fuelectenerg-7534	56	10	,	,	PUNCT
fuelectenerg-7534	56	11	affecting	affect	VERB
fuelectenerg-7534	56	12	overall	overall	ADJ
fuelectenerg-7534	56	13	isolation	isolation	NOUN
fuelectenerg-7534	56	14	of	of	ADP
fuelectenerg-7534	56	15	the	the	DET
fuelectenerg-7534	56	16	device	device	NOUN
fuelectenerg-7534	56	17	.	.	PUNCT
fuelectenerg-7534	57	1	in	in	ADP
fuelectenerg-7534	57	2	case	case	NOUN
fuelectenerg-7534	57	3	of	of	ADP
fuelectenerg-7534	57	4	capacitive	capacitive	ADJ
fuelectenerg-7534	57	5	switches	switch	NOUN
fuelectenerg-7534	57	6	,	,	PUNCT
fuelectenerg-7534	57	7	the	the	DET
fuelectenerg-7534	57	8	contact	contact	NOUN
fuelectenerg-7534	57	9	point	point	NOUN
fuelectenerg-7534	57	10	is	be	AUX
fuelectenerg-7534	57	11	covered	cover	VERB
fuelectenerg-7534	57	12	by	by	ADP
fuelectenerg-7534	57	13	a	a	DET
fuelectenerg-7534	57	14	dielectric	dielectric	ADJ
fuelectenerg-7534	57	15	layer	layer	NOUN
fuelectenerg-7534	57	16	.	.	PUNCT
fuelectenerg-7534	58	1	this	this	PRON
fuelectenerg-7534	58	2	determines	determine	VERB
fuelectenerg-7534	58	3	a	a	DET
fuelectenerg-7534	58	4	low	low	ADJ
fuelectenerg-7534	58	5	capacitance	capacitance	NOUN
fuelectenerg-7534	58	6	in	in	ADP
fuelectenerg-7534	58	7	non	non	ADJ
fuelectenerg-7534	58	8	-	-	ADJ
fuelectenerg-7534	58	9	actuation	actuation	ADJ
fuelectenerg-7534	58	10	“	"	PUNCT
fuelectenerg-7534	58	11	off	off	ADJ
fuelectenerg-7534	58	12	”	"	PUNCT
fuelectenerg-7534	58	13	state	state	NOUN
fuelectenerg-7534	58	14	,	,	PUNCT
fuelectenerg-7534	58	15	and	and	CCONJ
fuelectenerg-7534	58	16	a	a	DET
fuelectenerg-7534	58	17	high	high	ADJ
fuelectenerg-7534	58	18	capacitance	capacitance	NOUN
fuelectenerg-7534	58	19	when	when	SCONJ
fuelectenerg-7534	58	20	the	the	DET
fuelectenerg-7534	58	21	membrane	membrane	NOUN
fuelectenerg-7534	58	22	is	be	AUX
fuelectenerg-7534	58	23	actuated	actuate	VERB
fuelectenerg-7534	58	24	in	in	ADP
fuelectenerg-7534	58	25	“	"	PUNCT
fuelectenerg-7534	58	26	on	on	ADP
fuelectenerg-7534	58	27	”	"	PUNCT
fuelectenerg-7534	58	28	state	state	NOUN
fuelectenerg-7534	58	29	.	.	PUNCT
fuelectenerg-7534	59	1	since	since	SCONJ
fuelectenerg-7534	59	2	this	this	DET
fuelectenerg-7534	59	3	limits	limit	VERB
fuelectenerg-7534	59	4	the	the	DET
fuelectenerg-7534	59	5	isolation	isolation	NOUN
fuelectenerg-7534	59	6	performances	performance	NOUN
fuelectenerg-7534	59	7	at	at	ADP
fuelectenerg-7534	59	8	both	both	CCONJ
fuelectenerg-7534	59	9	high	high	ADJ
fuelectenerg-7534	59	10	and	and	CCONJ
fuelectenerg-7534	59	11	low	low	ADJ
fuelectenerg-7534	59	12	frequencies	frequency	NOUN
fuelectenerg-7534	59	13	,	,	PUNCT
fuelectenerg-7534	59	14	capacitive	capacitive	ADJ
fuelectenerg-7534	59	15	switches	switch	NOUN
fuelectenerg-7534	59	16	can	can	AUX
fuelectenerg-7534	59	17	be	be	AUX
fuelectenerg-7534	59	18	considered	consider	VERB
fuelectenerg-7534	59	19	more	more	ADV
fuelectenerg-7534	59	20	narrow	narrow	ADJ
fuelectenerg-7534	59	21	-	-	PUNCT
fuelectenerg-7534	59	22	band	band	NOUN
fuelectenerg-7534	59	23	.	.	PUNCT
fuelectenerg-7534	60	1	due	due	ADP
fuelectenerg-7534	60	2	to	to	ADP
fuelectenerg-7534	60	3	this	this	DET
fuelectenerg-7534	60	4	dynamics	dynamic	NOUN
fuelectenerg-7534	60	5	of	of	ADP
fuelectenerg-7534	60	6	their	their	PRON
fuelectenerg-7534	60	7	capacitance	capacitance	NOUN
fuelectenerg-7534	60	8	values	value	NOUN
fuelectenerg-7534	60	9	,	,	PUNCT
fuelectenerg-7534	60	10	capacitive	capacitive	ADJ
fuelectenerg-7534	60	11	switches	switch	NOUN
fuelectenerg-7534	60	12	are	be	AUX
fuelectenerg-7534	60	13	usually	usually	ADV
fuelectenerg-7534	60	14	evaluated	evaluate	VERB
fuelectenerg-7534	60	15	on	on	ADP
fuelectenerg-7534	60	16	the	the	DET
fuelectenerg-7534	60	17	basis	basis	NOUN
fuelectenerg-7534	60	18	of	of	ADP
fuelectenerg-7534	60	19	their	their	PRON
fuelectenerg-7534	60	20	“	"	PUNCT
fuelectenerg-7534	60	21	on	on	ADP
fuelectenerg-7534	60	22	/	/	SYM
fuelectenerg-7534	60	23	off	off	NOUN
fuelectenerg-7534	60	24	”	"	PUNCT
fuelectenerg-7534	60	25	capacitance	capacitance	NOUN
fuelectenerg-7534	60	26	ratio	ratio	NOUN
fuelectenerg-7534	60	27	,	,	PUNCT
fuelectenerg-7534	60	28	which	which	PRON
fuelectenerg-7534	60	29	should	should	AUX
fuelectenerg-7534	60	30	be	be	AUX
fuelectenerg-7534	60	31	as	as	ADV
fuelectenerg-7534	60	32	high	high	ADJ
fuelectenerg-7534	60	33	as	as	ADP
fuelectenerg-7534	60	34	possible	possible	ADJ
fuelectenerg-7534	60	35	.	.	PUNCT
fuelectenerg-7534	61	1	additional	additional	ADJ
fuelectenerg-7534	61	2	details	detail	NOUN
fuelectenerg-7534	61	3	concerning	concern	VERB
fuelectenerg-7534	61	4	advantages	advantage	NOUN
fuelectenerg-7534	61	5	or	or	CCONJ
fuelectenerg-7534	61	6	vulnerabilities	vulnerability	NOUN
fuelectenerg-7534	61	7	of	of	ADP
fuelectenerg-7534	61	8	such	such	ADJ
fuelectenerg-7534	61	9	devices	device	NOUN
fuelectenerg-7534	61	10	in	in	ADP
fuelectenerg-7534	61	11	terms	term	NOUN
fuelectenerg-7534	61	12	of	of	ADP
fuelectenerg-7534	61	13	structure	structure	NOUN
fuelectenerg-7534	61	14	,	,	PUNCT
fuelectenerg-7534	61	15	performances	performance	NOUN
fuelectenerg-7534	61	16	,	,	PUNCT
fuelectenerg-7534	61	17	frequency	frequency	NOUN
fuelectenerg-7534	61	18	range	range	NOUN
fuelectenerg-7534	61	19	of	of	ADP
fuelectenerg-7534	61	20	usability	usability	NOUN
fuelectenerg-7534	61	21	are	be	AUX
fuelectenerg-7534	61	22	investigated	investigate	VERB
fuelectenerg-7534	61	23	in	in	ADP
fuelectenerg-7534	61	24	depth	depth	NOUN
fuelectenerg-7534	61	25	in	in	ADP
fuelectenerg-7534	61	26	[	[	X
fuelectenerg-7534	61	27	11	11	NUM
fuelectenerg-7534	61	28	]	]	PUNCT
fuelectenerg-7534	61	29	.	.	PUNCT
fuelectenerg-7534	62	1	considering	consider	VERB
fuelectenerg-7534	62	2	the	the	DET
fuelectenerg-7534	62	3	large	large	ADJ
fuelectenerg-7534	62	4	amount	amount	NOUN
fuelectenerg-7534	62	5	of	of	ADP
fuelectenerg-7534	62	6	literature	literature	NOUN
fuelectenerg-7534	62	7	in	in	ADP
fuelectenerg-7534	62	8	this	this	DET
fuelectenerg-7534	62	9	field	field	NOUN
fuelectenerg-7534	62	10	,	,	PUNCT
fuelectenerg-7534	62	11	some	some	DET
fuelectenerg-7534	62	12	interesting	interesting	ADJ
fuelectenerg-7534	62	13	proposals	proposal	NOUN
fuelectenerg-7534	62	14	of	of	ADP
fuelectenerg-7534	62	15	the	the	DET
fuelectenerg-7534	62	16	last	last	ADJ
fuelectenerg-7534	62	17	half	half	ADJ
fuelectenerg-7534	62	18	decade	decade	NOUN
fuelectenerg-7534	62	19	are	be	AUX
fuelectenerg-7534	62	20	considered	consider	VERB
fuelectenerg-7534	62	21	.	.	PUNCT
fuelectenerg-7534	63	1	to	to	ADP
fuelectenerg-7534	63	2	this	this	DET
fuelectenerg-7534	63	3	end	end	NOUN
fuelectenerg-7534	63	4	,	,	PUNCT
fuelectenerg-7534	63	5	table	table	NOUN
fuelectenerg-7534	63	6	2	2	NUM
fuelectenerg-7534	63	7	is	be	AUX
fuelectenerg-7534	63	8	provided	provide	VERB
fuelectenerg-7534	63	9	for	for	ADP
fuelectenerg-7534	63	10	a	a	DET
fuelectenerg-7534	63	11	better	well	ADJ
fuelectenerg-7534	63	12	comparison	comparison	NOUN
fuelectenerg-7534	63	13	of	of	ADP
fuelectenerg-7534	63	14	the	the	DET
fuelectenerg-7534	63	15	discussed	discuss	VERB
fuelectenerg-7534	63	16	research	research	NOUN
fuelectenerg-7534	63	17	items	item	NOUN
fuelectenerg-7534	63	18	in	in	ADP
fuelectenerg-7534	63	19	terms	term	NOUN
fuelectenerg-7534	63	20	of	of	ADP
fuelectenerg-7534	63	21	their	their	PRON
fuelectenerg-7534	63	22	characteristic	characteristic	ADJ
fuelectenerg-7534	63	23	parameters	parameter	NOUN
fuelectenerg-7534	63	24	.	.	PUNCT
fuelectenerg-7534	64	1	2.1	2.1	NUM
fuelectenerg-7534	64	2	.	.	PUNCT
fuelectenerg-7534	65	1	ohmic	ohmic	ADJ
fuelectenerg-7534	65	2	switches	switch	NOUN
fuelectenerg-7534	65	3	considering	consider	VERB
fuelectenerg-7534	65	4	ohmic	ohmic	ADJ
fuelectenerg-7534	65	5	switches	switch	NOUN
fuelectenerg-7534	65	6	,	,	PUNCT
fuelectenerg-7534	65	7	[	[	X
fuelectenerg-7534	65	8	13	13	NUM
fuelectenerg-7534	65	9	]	]	PUNCT
fuelectenerg-7534	65	10	presents	present	VERB
fuelectenerg-7534	65	11	a	a	DET
fuelectenerg-7534	65	12	buckle	buckle	NOUN
fuelectenerg-7534	65	13	-	-	PUNCT
fuelectenerg-7534	65	14	beam	beam	NOUN
fuelectenerg-7534	65	15	structure	structure	NOUN
fuelectenerg-7534	65	16	,	,	PUNCT
fuelectenerg-7534	65	17	whose	whose	DET
fuelectenerg-7534	65	18	actuation	actuation	NOUN
fuelectenerg-7534	65	19	follows	follow	VERB
fuelectenerg-7534	65	20	a	a	DET
fuelectenerg-7534	65	21	vertical	vertical	ADJ
fuelectenerg-7534	65	22	movement	movement	NOUN
fuelectenerg-7534	65	23	to	to	PART
fuelectenerg-7534	65	24	connect	connect	VERB
fuelectenerg-7534	65	25	the	the	DET
fuelectenerg-7534	65	26	two	two	NUM
fuelectenerg-7534	65	27	interrupted	interrupted	ADJ
fuelectenerg-7534	65	28	sections	section	NOUN
fuelectenerg-7534	65	29	of	of	ADP
fuelectenerg-7534	65	30	the	the	DET
fuelectenerg-7534	65	31	signal	signal	ADJ
fuelectenerg-7534	65	32	line	line	NOUN
fuelectenerg-7534	65	33	,	,	PUNCT
fuelectenerg-7534	65	34	thanks	thank	NOUN
fuelectenerg-7534	65	35	to	to	ADP
fuelectenerg-7534	65	36	a	a	DET
fuelectenerg-7534	65	37	buried	bury	VERB
fuelectenerg-7534	65	38	electrode	electrode	NOUN
fuelectenerg-7534	65	39	.	.	PUNCT
fuelectenerg-7534	66	1	the	the	DET
fuelectenerg-7534	66	2	beam	beam	NOUN
fuelectenerg-7534	66	3	structure	structure	NOUN
fuelectenerg-7534	66	4	is	be	AUX
fuelectenerg-7534	66	5	based	base	VERB
fuelectenerg-7534	66	6	on	on	ADP
fuelectenerg-7534	66	7	a	a	DET
fuelectenerg-7534	66	8	chevron	chevron	ADJ
fuelectenerg-7534	66	9	thermal	thermal	ADJ
fuelectenerg-7534	66	10	actuator	actuator	NOUN
fuelectenerg-7534	66	11	,	,	PUNCT
fuelectenerg-7534	66	12	in	in	ADP
fuelectenerg-7534	66	13	which	which	PRON
fuelectenerg-7534	66	14	the	the	DET
fuelectenerg-7534	66	15	provided	provide	VERB
fuelectenerg-7534	66	16	voltage	voltage	NOUN
fuelectenerg-7534	66	17	causes	cause	VERB
fuelectenerg-7534	66	18	heating	heating	NOUN
fuelectenerg-7534	66	19	and	and	CCONJ
fuelectenerg-7534	66	20	deformation	deformation	NOUN
fuelectenerg-7534	66	21	of	of	ADP
fuelectenerg-7534	66	22	the	the	DET
fuelectenerg-7534	66	23	structure	structure	NOUN
fuelectenerg-7534	66	24	,	,	PUNCT
fuelectenerg-7534	66	25	with	with	ADP
fuelectenerg-7534	66	26	consequent	consequent	ADJ
fuelectenerg-7534	66	27	horizontal	horizontal	ADJ
fuelectenerg-7534	66	28	displacement	displacement	NOUN
fuelectenerg-7534	66	29	and	and	CCONJ
fuelectenerg-7534	66	30	de	de	NOUN
fuelectenerg-7534	66	31	-	-	NOUN
fuelectenerg-7534	66	32	actuation	actuation	NOUN
fuelectenerg-7534	66	33	.	.	PUNCT
fuelectenerg-7534	67	1	its	its	PRON
fuelectenerg-7534	67	2	working	work	VERB
fuelectenerg-7534	67	3	principle	principle	NOUN
fuelectenerg-7534	67	4	is	be	AUX
fuelectenerg-7534	67	5	represented	represent	VERB
fuelectenerg-7534	67	6	in	in	ADP
fuelectenerg-7534	67	7	figure	figure	NOUN
fuelectenerg-7534	67	8	1a	1a	NOUN
fuelectenerg-7534	67	9	.	.	PUNCT
fuelectenerg-7534	68	1	besides	besides	SCONJ
fuelectenerg-7534	68	2	its	its	PRON
fuelectenerg-7534	68	3	remarkable	remarkable	ADJ
fuelectenerg-7534	68	4	electrical	electrical	ADJ
fuelectenerg-7534	68	5	performances	performance	NOUN
fuelectenerg-7534	68	6	within	within	ADP
fuelectenerg-7534	68	7	the	the	DET
fuelectenerg-7534	68	8	measured	measure	VERB
fuelectenerg-7534	68	9	(	(	PUNCT
fuelectenerg-7534	68	10	0	0	NUM
fuelectenerg-7534	68	11	-	-	SYM
fuelectenerg-7534	68	12	20	20	NUM
fuelectenerg-7534	68	13	)	)	PUNCT
fuelectenerg-7534	68	14	ghz	ghz	NOUN
fuelectenerg-7534	68	15	range	range	NOUN
fuelectenerg-7534	68	16	,	,	PUNCT
fuelectenerg-7534	68	17	the	the	DET
fuelectenerg-7534	68	18	device	device	NOUN
fuelectenerg-7534	68	19	based	base	VERB
fuelectenerg-7534	68	20	on	on	ADP
fuelectenerg-7534	68	21	silicon	silicon	NOUN
fuelectenerg-7534	68	22	substrate	substrate	NOUN
fuelectenerg-7534	68	23	has	have	AUX
fuelectenerg-7534	68	24	been	be	AUX
fuelectenerg-7534	68	25	thermally	thermally	ADV
fuelectenerg-7534	68	26	characterized	characterize	VERB
fuelectenerg-7534	68	27	in	in	ADP
fuelectenerg-7534	68	28	the	the	DET
fuelectenerg-7534	68	29	range	range	NOUN
fuelectenerg-7534	68	30	from	from	ADP
fuelectenerg-7534	68	31	-20	-20	NUM
fuelectenerg-7534	68	32	to	to	ADP
fuelectenerg-7534	68	33	140	140	NUM
fuelectenerg-7534	68	34	°	°	ADP
fuelectenerg-7534	68	35	c	c	NOUN
fuelectenerg-7534	68	36	to	to	PART
fuelectenerg-7534	68	37	test	test	VERB
fuelectenerg-7534	68	38	possible	possible	ADJ
fuelectenerg-7534	68	39	detrimental	detrimental	ADJ
fuelectenerg-7534	68	40	effects	effect	NOUN
fuelectenerg-7534	68	41	of	of	ADP
fuelectenerg-7534	68	42	common	common	ADJ
fuelectenerg-7534	68	43	packaging	packaging	NOUN
fuelectenerg-7534	68	44	processes	process	NOUN
fuelectenerg-7534	68	45	on	on	ADP
fuelectenerg-7534	68	46	the	the	DET
fuelectenerg-7534	68	47	original	original	ADJ
fuelectenerg-7534	68	48	structure	structure	NOUN
fuelectenerg-7534	68	49	.	.	PUNCT
fuelectenerg-7534	69	1	the	the	DET
fuelectenerg-7534	69	2	results	result	NOUN
fuelectenerg-7534	69	3	demonstrate	demonstrate	VERB
fuelectenerg-7534	69	4	minimal	minimal	ADJ
fuelectenerg-7534	69	5	variations	variation	NOUN
fuelectenerg-7534	69	6	of	of	ADP
fuelectenerg-7534	69	7	pull	pull	NOUN
fuelectenerg-7534	69	8	-	-	PUNCT
fuelectenerg-7534	69	9	in	in	NOUN
fuelectenerg-7534	69	10	(	(	PUNCT
fuelectenerg-7534	69	11	actuation	actuation	NOUN
fuelectenerg-7534	69	12	)	)	PUNCT
fuelectenerg-7534	69	13	voltage	voltage	NOUN
fuelectenerg-7534	69	14	and	and	CCONJ
fuelectenerg-7534	69	15	losses	loss	NOUN
fuelectenerg-7534	69	16	.	.	PUNCT
fuelectenerg-7534	70	1	with	with	ADP
fuelectenerg-7534	70	2	the	the	DET
fuelectenerg-7534	70	3	target	target	NOUN
fuelectenerg-7534	70	4	of	of	ADP
fuelectenerg-7534	70	5	a	a	DET
fuelectenerg-7534	70	6	device	device	NOUN
fuelectenerg-7534	70	7	operating	operate	VERB
fuelectenerg-7534	70	8	at	at	ADP
fuelectenerg-7534	70	9	d	d	PROPN
fuelectenerg-7534	70	10	band	band	NOUN
fuelectenerg-7534	70	11	(	(	PUNCT
fuelectenerg-7534	70	12	(	(	PUNCT
fuelectenerg-7534	70	13	110	110	NUM
fuelectenerg-7534	70	14	-	-	SYM
fuelectenerg-7534	70	15	170	170	NUM
fuelectenerg-7534	70	16	)	)	PUNCT
fuelectenerg-7534	70	17	ghz	ghz	NOUN
fuelectenerg-7534	70	18	)	)	PUNCT
fuelectenerg-7534	70	19	,	,	PUNCT
fuelectenerg-7534	70	20	[	[	X
fuelectenerg-7534	70	21	14	14	NUM
fuelectenerg-7534	70	22	]	]	PUNCT
fuelectenerg-7534	70	23	proposes	propose	VERB
fuelectenerg-7534	70	24	an	an	DET
fuelectenerg-7534	70	25	spdt	spdt	NOUN
fuelectenerg-7534	70	26	(	(	PUNCT
fuelectenerg-7534	70	27	single	single	ADJ
fuelectenerg-7534	70	28	pole	pole	NOUN
fuelectenerg-7534	70	29	double	double	ADJ
fuelectenerg-7534	70	30	throw	throw	NOUN
fuelectenerg-7534	70	31	)	)	PUNCT
fuelectenerg-7534	70	32	switch	switch	NOUN
fuelectenerg-7534	70	33	integrated	integrate	VERB
fuelectenerg-7534	70	34	in	in	ADP
fuelectenerg-7534	70	35	bicmos	bicmos	PROPN
fuelectenerg-7534	70	36	(	(	PUNCT
fuelectenerg-7534	70	37	bipolar	bipolar	ADJ
fuelectenerg-7534	70	38	cmos	cmos	NOUN
fuelectenerg-7534	70	39	)	)	PUNCT
fuelectenerg-7534	70	40	technology	technology	NOUN
fuelectenerg-7534	70	41	,	,	PUNCT
fuelectenerg-7534	70	42	based	base	VERB
fuelectenerg-7534	70	43	on	on	ADP
fuelectenerg-7534	70	44	an	an	DET
fuelectenerg-7534	70	45	initial	initial	ADJ
fuelectenerg-7534	70	46	t	t	NOUN
fuelectenerg-7534	70	47	-	-	PUNCT
fuelectenerg-7534	70	48	junction	junction	NOUN
fuelectenerg-7534	70	49	connected	connect	VERB
fuelectenerg-7534	70	50	to	to	ADP
fuelectenerg-7534	70	51	two	two	NUM
fuelectenerg-7534	70	52	terminal	terminal	ADJ
fuelectenerg-7534	70	53	spst	spst	PROPN
fuelectenerg-7534	70	54	(	(	PUNCT
fuelectenerg-7534	70	55	single	single	ADJ
fuelectenerg-7534	70	56	pole	pole	ADJ
fuelectenerg-7534	70	57	single	single	ADJ
fuelectenerg-7534	70	58	throw	throw	NOUN
fuelectenerg-7534	70	59	)	)	PUNCT
fuelectenerg-7534	70	60	switches	switch	NOUN
fuelectenerg-7534	70	61	.	.	PUNCT
fuelectenerg-7534	71	1	each	each	DET
fuelectenerg-7534	71	2	spst	spst	PROPN
fuelectenerg-7534	71	3	switch	switch	NOUN
fuelectenerg-7534	71	4	is	be	AUX
fuelectenerg-7534	71	5	encompassed	encompass	VERB
fuelectenerg-7534	71	6	in	in	ADP
fuelectenerg-7534	71	7	a	a	DET
fuelectenerg-7534	71	8	cavity	cavity	NOUN
fuelectenerg-7534	71	9	containing	contain	VERB
fuelectenerg-7534	71	10	two	two	NUM
fuelectenerg-7534	71	11	actuation	actuation	NOUN
fuelectenerg-7534	71	12	electrodes	electrode	NOUN
fuelectenerg-7534	71	13	on	on	ADP
fuelectenerg-7534	71	14	both	both	DET
fuelectenerg-7534	71	15	sides	side	NOUN
fuelectenerg-7534	71	16	of	of	ADP
fuelectenerg-7534	71	17	elevated	elevated	ADJ
fuelectenerg-7534	71	18	signal	signal	NOUN
fuelectenerg-7534	71	19	line	line	NOUN
fuelectenerg-7534	71	20	,	,	PUNCT
fuelectenerg-7534	71	21	an	an	DET
fuelectenerg-7534	71	22	overhead	overhead	ADJ
fuelectenerg-7534	71	23	membrane	membrane	NOUN
fuelectenerg-7534	71	24	,	,	PUNCT
fuelectenerg-7534	71	25	and	and	CCONJ
fuelectenerg-7534	71	26	a	a	DET
fuelectenerg-7534	71	27	metallic	metallic	ADJ
fuelectenerg-7534	71	28	plate	plate	NOUN
fuelectenerg-7534	71	29	for	for	ADP
fuelectenerg-7534	71	30	protection	protection	NOUN
fuelectenerg-7534	71	31	on	on	ADP
fuelectenerg-7534	71	32	top	top	NOUN
fuelectenerg-7534	71	33	of	of	ADP
fuelectenerg-7534	71	34	the	the	DET
fuelectenerg-7534	71	35	cavity	cavity	NOUN
fuelectenerg-7534	71	36	,	,	PUNCT
fuelectenerg-7534	71	37	as	as	SCONJ
fuelectenerg-7534	71	38	reported	report	VERB
fuelectenerg-7534	71	39	in	in	ADP
fuelectenerg-7534	71	40	figure	figure	NOUN
fuelectenerg-7534	71	41	1b	1b	NUM
fuelectenerg-7534	71	42	.	.	PUNCT
fuelectenerg-7534	72	1	the	the	DET
fuelectenerg-7534	72	2	actuation	actuation	NOUN
fuelectenerg-7534	72	3	of	of	ADP
fuelectenerg-7534	72	4	the	the	DET
fuelectenerg-7534	72	5	membrane	membrane	NOUN
fuelectenerg-7534	72	6	will	will	AUX
fuelectenerg-7534	72	7	connect	connect	VERB
fuelectenerg-7534	72	8	the	the	DET
fuelectenerg-7534	72	9	signal	signal	ADJ
fuelectenerg-7534	72	10	line	line	NOUN
fuelectenerg-7534	72	11	to	to	PART
fuelectenerg-7534	72	12	ground	ground	VERB
fuelectenerg-7534	72	13	,	,	PUNCT
fuelectenerg-7534	72	14	isolating	isolate	VERB
fuelectenerg-7534	72	15	the	the	DET
fuelectenerg-7534	72	16	corresponding	corresponding	ADJ
fuelectenerg-7534	72	17	output	output	NOUN
fuelectenerg-7534	72	18	port	port	NOUN
fuelectenerg-7534	72	19	.	.	PUNCT
fuelectenerg-7534	73	1	by	by	ADP
fuelectenerg-7534	73	2	choosing	choose	VERB
fuelectenerg-7534	73	3	an	an	DET
fuelectenerg-7534	73	4	actuation	actuation	NOUN
fuelectenerg-7534	73	5	voltage	voltage	NOUN
fuelectenerg-7534	73	6	of	of	ADP
fuelectenerg-7534	73	7	60	60	NUM
fuelectenerg-7534	73	8	v	v	NOUN
fuelectenerg-7534	73	9	,	,	PUNCT
fuelectenerg-7534	73	10	the	the	DET
fuelectenerg-7534	73	11	authors	author	NOUN
fuelectenerg-7534	73	12	reached	reach	VERB
fuelectenerg-7534	73	13	switch	switch	NOUN
fuelectenerg-7534	73	14	-	-	PUNCT
fuelectenerg-7534	73	15	on	on	ADP
fuelectenerg-7534	73	16	and	and	CCONJ
fuelectenerg-7534	73	17	switch	switch	VERB
fuelectenerg-7534	73	18	-	-	PUNCT
fuelectenerg-7534	73	19	off	off	ADP
fuelectenerg-7534	73	20	time	time	NOUN
fuelectenerg-7534	73	21	smaller	small	ADJ
fuelectenerg-7534	73	22	than	than	ADP
fuelectenerg-7534	73	23	10	10	NUM
fuelectenerg-7534	73	24	μs	μs	NOUN
fuelectenerg-7534	73	25	.	.	PUNCT
fuelectenerg-7534	74	1	another	another	DET
fuelectenerg-7534	74	2	substantial	substantial	ADJ
fuelectenerg-7534	74	3	contribution	contribution	NOUN
fuelectenerg-7534	74	4	comes	come	VERB
fuelectenerg-7534	74	5	from	from	ADP
fuelectenerg-7534	74	6	[	[	X
fuelectenerg-7534	74	7	15	15	NUM
fuelectenerg-7534	74	8	]	]	PUNCT
fuelectenerg-7534	74	9	,	,	PUNCT
fuelectenerg-7534	74	10	in	in	ADP
fuelectenerg-7534	74	11	which	which	PRON
fuelectenerg-7534	74	12	the	the	DET
fuelectenerg-7534	74	13	traditional	traditional	ADJ
fuelectenerg-7534	74	14	series	series	NOUN
fuelectenerg-7534	74	15	ohmic	ohmic	ADJ
fuelectenerg-7534	74	16	cantilever	cantilever	NOUN
fuelectenerg-7534	74	17	switch	switch	NOUN
fuelectenerg-7534	74	18	is	be	AUX
fuelectenerg-7534	74	19	provided	provide	VERB
fuelectenerg-7534	74	20	with	with	ADP
fuelectenerg-7534	74	21	two	two	NUM
fuelectenerg-7534	74	22	additional	additional	ADJ
fuelectenerg-7534	74	23	cantilevers	cantilever	NOUN
fuelectenerg-7534	74	24	allowing	allow	VERB
fuelectenerg-7534	74	25	a	a	DET
fuelectenerg-7534	74	26	shunt	shunt	NOUN
fuelectenerg-7534	74	27	connection	connection	NOUN
fuelectenerg-7534	74	28	to	to	PART
fuelectenerg-7534	74	29	ground	ground	NOUN
fuelectenerg-7534	74	30	of	of	ADP
fuelectenerg-7534	74	31	the	the	DET
fuelectenerg-7534	74	32	cpw	cpw	NOUN
fuelectenerg-7534	74	33	(	(	PUNCT
fuelectenerg-7534	74	34	coplanar	coplanar	VERB
fuelectenerg-7534	74	35	waveguide	waveguide	ADJ
fuelectenerg-7534	74	36	)	)	PUNCT
fuelectenerg-7534	74	37	,	,	PUNCT
fuelectenerg-7534	74	38	as	as	SCONJ
fuelectenerg-7534	74	39	shown	show	VERB
fuelectenerg-7534	74	40	in	in	ADP
fuelectenerg-7534	74	41	figure	figure	NOUN
fuelectenerg-7534	74	42	1c	1c	NOUN
fuelectenerg-7534	74	43	.	.	PUNCT
fuelectenerg-7534	75	1	actuation	actuation	NOUN
fuelectenerg-7534	75	2	of	of	ADP
fuelectenerg-7534	75	3	additional	additional	ADJ
fuelectenerg-7534	75	4	shunt	shunt	NOUN
fuelectenerg-7534	75	5	connections	connection	NOUN
fuelectenerg-7534	75	6	has	have	VERB
fuelectenerg-7534	75	7	a	a	DET
fuelectenerg-7534	75	8	dual	dual	ADJ
fuelectenerg-7534	75	9	purpose	purpose	NOUN
fuelectenerg-7534	75	10	:	:	PUNCT
fuelectenerg-7534	75	11	decreasing	decrease	VERB
fuelectenerg-7534	75	12	the	the	DET
fuelectenerg-7534	75	13	voltage	voltage	NOUN
fuelectenerg-7534	75	14	swing	swing	NOUN
fuelectenerg-7534	75	15	on	on	ADP
fuelectenerg-7534	75	16	the	the	DET
fuelectenerg-7534	75	17	main	main	ADJ
fuelectenerg-7534	75	18	series	series	NOUN
fuelectenerg-7534	75	19	contact	contact	NOUN
fuelectenerg-7534	75	20	and	and	CCONJ
fuelectenerg-7534	75	21	increasing	increase	VERB
fuelectenerg-7534	75	22	isolation	isolation	NOUN
fuelectenerg-7534	75	23	of	of	ADP
fuelectenerg-7534	75	24	the	the	DET
fuelectenerg-7534	75	25	output	output	NOUN
fuelectenerg-7534	75	26	port	port	NOUN
fuelectenerg-7534	75	27	.	.	PUNCT
fuelectenerg-7534	76	1	this	this	DET
fuelectenerg-7534	76	2	protection	protection	NOUN
fuelectenerg-7534	76	3	mechanism	mechanism	NOUN
fuelectenerg-7534	76	4	has	have	AUX
fuelectenerg-7534	76	5	proven	prove	VERB
fuelectenerg-7534	76	6	to	to	PART
fuelectenerg-7534	76	7	extend	extend	VERB
fuelectenerg-7534	76	8	reliability	reliability	NOUN
fuelectenerg-7534	76	9	of	of	ADP
fuelectenerg-7534	76	10	this	this	DET
fuelectenerg-7534	76	11	400x300	400x300	NUM
fuelectenerg-7534	76	12	μm2	μm2	NOUN
fuelectenerg-7534	76	13	device	device	NOUN
fuelectenerg-7534	76	14	up	up	ADP
fuelectenerg-7534	76	15	to	to	PART
fuelectenerg-7534	76	16	500	500	NUM
fuelectenerg-7534	76	17	million	million	NUM
fuelectenerg-7534	76	18	cycles	cycle	NOUN
fuelectenerg-7534	76	19	with	with	ADP
fuelectenerg-7534	76	20	1	1	NUM
fuelectenerg-7534	76	21	w	w	NOUN
fuelectenerg-7534	76	22	rf	rf	NOUN
fuelectenerg-7534	76	23	power	power	NOUN
fuelectenerg-7534	76	24	.	.	PUNCT
fuelectenerg-7534	77	1	a	a	DET
fuelectenerg-7534	77	2	comprehensive	comprehensive	ADJ
fuelectenerg-7534	77	3	overview	overview	NOUN
fuelectenerg-7534	77	4	of	of	ADP
fuelectenerg-7534	77	5	recent	recent	ADJ
fuelectenerg-7534	77	6	developments	development	NOUN
fuelectenerg-7534	77	7	in	in	ADP
fuelectenerg-7534	77	8	rf	rf	ADJ
fuelectenerg-7534	77	9	-	-	PUNCT
fuelectenerg-7534	77	10	mems	mems	ADJ
fuelectenerg-7534	77	11	technology	technology	NOUN
fuelectenerg-7534	77	12	337	337	NUM
fuelectenerg-7534	77	13	beside	beside	ADP
fuelectenerg-7534	77	14	electrical	electrical	ADJ
fuelectenerg-7534	77	15	performances	performance	NOUN
fuelectenerg-7534	77	16	,	,	PUNCT
fuelectenerg-7534	77	17	the	the	DET
fuelectenerg-7534	77	18	switching	switching	NOUN
fuelectenerg-7534	77	19	time	time	NOUN
fuelectenerg-7534	77	20	is	be	AUX
fuelectenerg-7534	77	21	remarkable	remarkable	ADJ
fuelectenerg-7534	77	22	too	too	ADV
fuelectenerg-7534	77	23	,	,	PUNCT
fuelectenerg-7534	77	24	being	be	AUX
fuelectenerg-7534	77	25	30.4	30.4	NUM
fuelectenerg-7534	77	26	μs	μs	NOUN
fuelectenerg-7534	77	27	and	and	CCONJ
fuelectenerg-7534	77	28	39.8	39.8	NUM
fuelectenerg-7534	77	29	μs	μs	NOUN
fuelectenerg-7534	77	30	for	for	ADP
fuelectenerg-7534	77	31	switch	switch	NOUN
fuelectenerg-7534	77	32	-	-	PUNCT
fuelectenerg-7534	77	33	on	on	ADP
fuelectenerg-7534	77	34	and	and	CCONJ
fuelectenerg-7534	77	35	switch	switch	VERB
fuelectenerg-7534	77	36	-	-	PUNCT
fuelectenerg-7534	77	37	off	off	ADP
fuelectenerg-7534	77	38	time	time	NOUN
fuelectenerg-7534	77	39	,	,	PUNCT
fuelectenerg-7534	77	40	respectively	respectively	ADV
fuelectenerg-7534	77	41	.	.	PUNCT
fuelectenerg-7534	78	1	fig	fig	NOUN
fuelectenerg-7534	78	2	.	.	PUNCT
fuelectenerg-7534	79	1	1	1	NUM
fuelectenerg-7534	79	2	(	(	PUNCT
fuelectenerg-7534	79	3	a	a	NOUN
fuelectenerg-7534	79	4	)	)	PUNCT
fuelectenerg-7534	79	5	movable	movable	ADJ
fuelectenerg-7534	79	6	membrane	membrane	NOUN
fuelectenerg-7534	79	7	reported	report	VERB
fuelectenerg-7534	79	8	in	in	ADP
fuelectenerg-7534	79	9	[	[	X
fuelectenerg-7534	79	10	13	13	NUM
fuelectenerg-7534	79	11	]	]	PUNCT
fuelectenerg-7534	79	12	,	,	PUNCT
fuelectenerg-7534	79	13	(	(	PUNCT
fuelectenerg-7534	79	14	b	b	X
fuelectenerg-7534	79	15	)	)	PUNCT
fuelectenerg-7534	79	16	cross	cross	NOUN
fuelectenerg-7534	79	17	section	section	NOUN
fuelectenerg-7534	79	18	of	of	ADP
fuelectenerg-7534	79	19	switch	switch	NOUN
fuelectenerg-7534	79	20	cavity	cavity	NOUN
fuelectenerg-7534	79	21	reported	report	VERB
fuelectenerg-7534	79	22	in	in	ADP
fuelectenerg-7534	79	23	[	[	X
fuelectenerg-7534	79	24	14	14	NUM
fuelectenerg-7534	79	25	]	]	PUNCT
fuelectenerg-7534	79	26	,	,	PUNCT
fuelectenerg-7534	79	27	(	(	PUNCT
fuelectenerg-7534	79	28	c	c	X
fuelectenerg-7534	79	29	)	)	PUNCT
fuelectenerg-7534	79	30	surface	surface	NOUN
fuelectenerg-7534	79	31	current	current	ADJ
fuelectenerg-7534	79	32	distribution	distribution	NOUN
fuelectenerg-7534	79	33	on	on	ADP
fuelectenerg-7534	79	34	switch	switch	NOUN
fuelectenerg-7534	79	35	realized	realize	VERB
fuelectenerg-7534	79	36	in	in	ADP
fuelectenerg-7534	79	37	[	[	X
fuelectenerg-7534	79	38	15	15	NUM
fuelectenerg-7534	79	39	]	]	PUNCT
fuelectenerg-7534	79	40	when	when	SCONJ
fuelectenerg-7534	79	41	lateral	lateral	ADJ
fuelectenerg-7534	79	42	cantilevers	cantilever	NOUN
fuelectenerg-7534	79	43	are	be	AUX
fuelectenerg-7534	79	44	actuated	actuate	VERB
fuelectenerg-7534	79	45	to	to	PART
fuelectenerg-7534	79	46	ensure	ensure	VERB
fuelectenerg-7534	79	47	maximum	maximum	ADJ
fuelectenerg-7534	79	48	isolation	isolation	NOUN
fuelectenerg-7534	79	49	.	.	PUNCT
fuelectenerg-7534	80	1	in	in	ADP
fuelectenerg-7534	80	2	[	[	X
fuelectenerg-7534	80	3	16	16	NUM
fuelectenerg-7534	80	4	]	]	X
fuelectenerg-7534	80	5	a	a	DET
fuelectenerg-7534	80	6	traditional	traditional	ADJ
fuelectenerg-7534	80	7	series	series	NOUN
fuelectenerg-7534	80	8	ohmic	ohmic	ADJ
fuelectenerg-7534	80	9	switch	switch	NOUN
fuelectenerg-7534	80	10	based	base	VERB
fuelectenerg-7534	80	11	on	on	ADP
fuelectenerg-7534	80	12	gaas	gaas	PROPN
fuelectenerg-7534	80	13	mmic	mmic	ADJ
fuelectenerg-7534	80	14	(	(	PUNCT
fuelectenerg-7534	80	15	monolithic	monolithic	ADJ
fuelectenerg-7534	80	16	microwave	microwave	NOUN
fuelectenerg-7534	80	17	integrated	integrate	VERB
fuelectenerg-7534	80	18	circuit	circuit	NOUN
fuelectenerg-7534	80	19	on	on	ADP
fuelectenerg-7534	80	20	gallium	gallium	NOUN
fuelectenerg-7534	80	21	arsenide	arsenide	NOUN
fuelectenerg-7534	80	22	)	)	PUNCT
fuelectenerg-7534	80	23	technology	technology	NOUN
fuelectenerg-7534	80	24	is	be	AUX
fuelectenerg-7534	80	25	discussed	discuss	VERB
fuelectenerg-7534	80	26	,	,	PUNCT
fuelectenerg-7534	80	27	with	with	ADP
fuelectenerg-7534	80	28	a	a	DET
fuelectenerg-7534	80	29	series	series	NOUN
fuelectenerg-7534	80	30	of	of	ADP
fuelectenerg-7534	80	31	etched	etch	VERB
fuelectenerg-7534	80	32	holes	hole	NOUN
fuelectenerg-7534	80	33	on	on	ADP
fuelectenerg-7534	80	34	the	the	DET
fuelectenerg-7534	80	35	surface	surface	NOUN
fuelectenerg-7534	80	36	of	of	ADP
fuelectenerg-7534	80	37	the	the	DET
fuelectenerg-7534	80	38	membrane	membrane	NOUN
fuelectenerg-7534	80	39	,	,	PUNCT
fuelectenerg-7534	80	40	in	in	ADP
fuelectenerg-7534	80	41	order	order	NOUN
fuelectenerg-7534	80	42	to	to	PART
fuelectenerg-7534	80	43	decrease	decrease	VERB
fuelectenerg-7534	80	44	the	the	DET
fuelectenerg-7534	80	45	pull	pull	NOUN
fuelectenerg-7534	80	46	-	-	PUNCT
fuelectenerg-7534	80	47	in	in	ADP
fuelectenerg-7534	80	48	voltage	voltage	NOUN
fuelectenerg-7534	80	49	.	.	PUNCT
fuelectenerg-7534	81	1	power	power	NOUN
fuelectenerg-7534	81	2	handling	handling	NOUN
fuelectenerg-7534	81	3	characterization	characterization	NOUN
fuelectenerg-7534	81	4	demonstrated	demonstrate	VERB
fuelectenerg-7534	81	5	acceptable	acceptable	ADJ
fuelectenerg-7534	81	6	performances	performance	NOUN
fuelectenerg-7534	81	7	up	up	ADP
fuelectenerg-7534	81	8	to	to	ADP
fuelectenerg-7534	81	9	36	36	NUM
fuelectenerg-7534	81	10	dbm	dbm	NOUN
fuelectenerg-7534	81	11	,	,	PUNCT
fuelectenerg-7534	81	12	while	while	SCONJ
fuelectenerg-7534	81	13	reliability	reliability	NOUN
fuelectenerg-7534	81	14	of	of	ADP
fuelectenerg-7534	81	15	2.4x107	2.4x107	ADJ
fuelectenerg-7534	81	16	cycles	cycle	NOUN
fuelectenerg-7534	81	17	has	have	AUX
fuelectenerg-7534	81	18	been	be	AUX
fuelectenerg-7534	81	19	verified	verify	VERB
fuelectenerg-7534	81	20	.	.	PUNCT
fuelectenerg-7534	82	1	a	a	DET
fuelectenerg-7534	82	2	more	more	ADV
fuelectenerg-7534	82	3	innovative	innovative	ADJ
fuelectenerg-7534	82	4	design	design	NOUN
fuelectenerg-7534	82	5	is	be	AUX
fuelectenerg-7534	82	6	reported	report	VERB
fuelectenerg-7534	82	7	in	in	ADP
fuelectenerg-7534	82	8	[	[	X
fuelectenerg-7534	82	9	17	17	NUM
fuelectenerg-7534	82	10	]	]	PUNCT
fuelectenerg-7534	82	11	,	,	PUNCT
fuelectenerg-7534	82	12	where	where	SCONJ
fuelectenerg-7534	82	13	a	a	DET
fuelectenerg-7534	82	14	laterally	laterally	ADV
fuelectenerg-7534	82	15	moving	move	VERB
fuelectenerg-7534	82	16	switch	switch	NOUN
fuelectenerg-7534	82	17	is	be	AUX
fuelectenerg-7534	82	18	proposed	propose	VERB
fuelectenerg-7534	82	19	in	in	ADP
fuelectenerg-7534	82	20	order	order	NOUN
fuelectenerg-7534	82	21	to	to	PART
fuelectenerg-7534	82	22	connect	connect	VERB
fuelectenerg-7534	82	23	the	the	DET
fuelectenerg-7534	82	24	two	two	NUM
fuelectenerg-7534	82	25	terminations	termination	NOUN
fuelectenerg-7534	82	26	of	of	ADP
fuelectenerg-7534	82	27	the	the	DET
fuelectenerg-7534	82	28	signal	signal	ADJ
fuelectenerg-7534	82	29	line	line	NOUN
fuelectenerg-7534	82	30	.	.	PUNCT
fuelectenerg-7534	83	1	the	the	DET
fuelectenerg-7534	83	2	movable	movable	ADJ
fuelectenerg-7534	83	3	section	section	NOUN
fuelectenerg-7534	83	4	is	be	AUX
fuelectenerg-7534	83	5	always	always	ADV
fuelectenerg-7534	83	6	in	in	ADP
fuelectenerg-7534	83	7	touch	touch	NOUN
fuelectenerg-7534	83	8	with	with	ADP
fuelectenerg-7534	83	9	the	the	DET
fuelectenerg-7534	83	10	input	input	NOUN
fuelectenerg-7534	83	11	sections	section	NOUN
fuelectenerg-7534	83	12	,	,	PUNCT
fuelectenerg-7534	83	13	and	and	CCONJ
fuelectenerg-7534	83	14	it	it	PRON
fuelectenerg-7534	83	15	comes	come	VERB
fuelectenerg-7534	83	16	in	in	ADP
fuelectenerg-7534	83	17	touch	touch	NOUN
fuelectenerg-7534	83	18	with	with	ADP
fuelectenerg-7534	83	19	the	the	DET
fuelectenerg-7534	83	20	output	output	NOUN
fuelectenerg-7534	83	21	section	section	NOUN
fuelectenerg-7534	83	22	by	by	ADP
fuelectenerg-7534	83	23	electrostatic	electrostatic	ADJ
fuelectenerg-7534	83	24	actuation	actuation	NOUN
fuelectenerg-7534	83	25	.	.	PUNCT
fuelectenerg-7534	84	1	triangular	triangular	NOUN
fuelectenerg-7534	84	2	beams	beam	NOUN
fuelectenerg-7534	84	3	in	in	ADP
fuelectenerg-7534	84	4	the	the	DET
fuelectenerg-7534	84	5	central	central	ADJ
fuelectenerg-7534	84	6	part	part	NOUN
fuelectenerg-7534	84	7	of	of	ADP
fuelectenerg-7534	84	8	the	the	DET
fuelectenerg-7534	84	9	membrane	membrane	NOUN
fuelectenerg-7534	84	10	structure	structure	NOUN
fuelectenerg-7534	84	11	provide	provide	VERB
fuelectenerg-7534	84	12	mechanical	mechanical	ADJ
fuelectenerg-7534	84	13	restoring	restore	VERB
fuelectenerg-7534	84	14	force	force	NOUN
fuelectenerg-7534	84	15	,	,	PUNCT
fuelectenerg-7534	84	16	to	to	PART
fuelectenerg-7534	84	17	move	move	VERB
fuelectenerg-7534	84	18	the	the	DET
fuelectenerg-7534	84	19	section	section	NOUN
fuelectenerg-7534	84	20	back	back	ADV
fuelectenerg-7534	84	21	to	to	ADP
fuelectenerg-7534	84	22	its	its	PRON
fuelectenerg-7534	84	23	rest	rest	NOUN
fuelectenerg-7534	84	24	position	position	NOUN
fuelectenerg-7534	84	25	.	.	PUNCT
fuelectenerg-7534	85	1	a	a	DET
fuelectenerg-7534	85	2	voltage	voltage	NOUN
fuelectenerg-7534	85	3	of	of	ADP
fuelectenerg-7534	85	4	90	90	NUM
fuelectenerg-7534	85	5	v	v	NOUN
fuelectenerg-7534	85	6	must	must	AUX
fuelectenerg-7534	85	7	be	be	AUX
fuelectenerg-7534	85	8	applied	apply	VERB
fuelectenerg-7534	85	9	to	to	PART
fuelectenerg-7534	85	10	ensure	ensure	VERB
fuelectenerg-7534	85	11	proper	proper	ADJ
fuelectenerg-7534	85	12	contact	contact	NOUN
fuelectenerg-7534	85	13	between	between	ADP
fuelectenerg-7534	85	14	the	the	DET
fuelectenerg-7534	85	15	signal	signal	ADJ
fuelectenerg-7534	85	16	lines	line	NOUN
fuelectenerg-7534	85	17	,	,	PUNCT
fuelectenerg-7534	85	18	with	with	ADP
fuelectenerg-7534	85	19	a	a	DET
fuelectenerg-7534	85	20	38	38	NUM
fuelectenerg-7534	85	21	and	and	CCONJ
fuelectenerg-7534	85	22	57	57	NUM
fuelectenerg-7534	85	23	μs	μs	NOUN
fuelectenerg-7534	85	24	for	for	ADP
fuelectenerg-7534	85	25	switch	switch	NOUN
fuelectenerg-7534	85	26	-	-	PUNCT
fuelectenerg-7534	85	27	on	on	ADP
fuelectenerg-7534	85	28	and	and	CCONJ
fuelectenerg-7534	85	29	switch	switch	VERB
fuelectenerg-7534	85	30	-	-	PUNCT
fuelectenerg-7534	85	31	off	off	ADP
fuelectenerg-7534	85	32	time	time	NOUN
fuelectenerg-7534	85	33	,	,	PUNCT
fuelectenerg-7534	85	34	respectively	respectively	ADV
fuelectenerg-7534	85	35	.	.	PUNCT
fuelectenerg-7534	86	1	performances	performance	NOUN
fuelectenerg-7534	86	2	for	for	ADP
fuelectenerg-7534	86	3	an	an	DET
fuelectenerg-7534	86	4	application	application	NOUN
fuelectenerg-7534	86	5	in	in	ADP
fuelectenerg-7534	86	6	5	5	NUM
fuelectenerg-7534	86	7	g	g	NOUN
fuelectenerg-7534	86	8	scenario	scenario	NOUN
fuelectenerg-7534	86	9	has	have	AUX
fuelectenerg-7534	86	10	been	be	AUX
fuelectenerg-7534	86	11	considered	consider	VERB
fuelectenerg-7534	86	12	at	at	ADP
fuelectenerg-7534	86	13	3.5	3.5	NUM
fuelectenerg-7534	86	14	ghz	ghz	NOUN
fuelectenerg-7534	86	15	and	and	CCONJ
fuelectenerg-7534	86	16	28	28	NUM
fuelectenerg-7534	86	17	ghz	ghz	NOUN
fuelectenerg-7534	86	18	.	.	PUNCT
fuelectenerg-7534	87	1	more	more	ADJ
fuelectenerg-7534	87	2	complex	complex	ADJ
fuelectenerg-7534	87	3	networks	network	NOUN
fuelectenerg-7534	87	4	have	have	AUX
fuelectenerg-7534	87	5	been	be	AUX
fuelectenerg-7534	87	6	implemented	implement	VERB
fuelectenerg-7534	87	7	by	by	ADP
fuelectenerg-7534	87	8	this	this	DET
fuelectenerg-7534	87	9	basic	basic	ADJ
fuelectenerg-7534	87	10	switch	switch	NOUN
fuelectenerg-7534	87	11	,	,	PUNCT
fuelectenerg-7534	87	12	including	include	VERB
fuelectenerg-7534	87	13	spdt	spdt	NOUN
fuelectenerg-7534	87	14	,	,	PUNCT
fuelectenerg-7534	87	15	sp3	sp3	PROPN
fuelectenerg-7534	87	16	t	t	PROPN
fuelectenerg-7534	87	17	(	(	PUNCT
fuelectenerg-7534	87	18	single	single	ADJ
fuelectenerg-7534	87	19	pole	pole	NOUN
fuelectenerg-7534	87	20	3	3	NUM
fuelectenerg-7534	87	21	throws	throw	VERB
fuelectenerg-7534	87	22	)	)	PUNCT
fuelectenerg-7534	87	23	,	,	PUNCT
fuelectenerg-7534	87	24	and	and	CCONJ
fuelectenerg-7534	87	25	sp6	sp6	NOUN
fuelectenerg-7534	87	26	t	t	NOUN
fuelectenerg-7534	87	27	(	(	PUNCT
fuelectenerg-7534	87	28	single	single	ADJ
fuelectenerg-7534	87	29	pole	pole	NOUN
fuelectenerg-7534	87	30	6	6	NUM
fuelectenerg-7534	87	31	throws	throw	NOUN
fuelectenerg-7534	87	32	)	)	PUNCT
fuelectenerg-7534	87	33	,	,	PUNCT
fuelectenerg-7534	87	34	showing	show	VERB
fuelectenerg-7534	87	35	to	to	PART
fuelectenerg-7534	87	36	be	be	AUX
fuelectenerg-7534	87	37	operational	operational	ADJ
fuelectenerg-7534	87	38	beyond	beyond	ADP
fuelectenerg-7534	87	39	1	1	NUM
fuelectenerg-7534	87	40	billion	billion	NUM
fuelectenerg-7534	87	41	cycles	cycle	NOUN
fuelectenerg-7534	87	42	with	with	ADP
fuelectenerg-7534	87	43	1	1	NUM
fuelectenerg-7534	87	44	w	w	NOUN
fuelectenerg-7534	87	45	rf	rf	NOUN
fuelectenerg-7534	87	46	power	power	NOUN
fuelectenerg-7534	87	47	.	.	PUNCT
fuelectenerg-7534	88	1	footprint	footprint	NOUN
fuelectenerg-7534	88	2	of	of	ADP
fuelectenerg-7534	88	3	these	these	DET
fuelectenerg-7534	88	4	devices	device	NOUN
fuelectenerg-7534	88	5	based	base	VERB
fuelectenerg-7534	88	6	on	on	ADP
fuelectenerg-7534	88	7	alumina	alumina	NOUN
fuelectenerg-7534	88	8	substrate	substrate	NOUN
fuelectenerg-7534	88	9	does	do	AUX
fuelectenerg-7534	88	10	not	not	PART
fuelectenerg-7534	88	11	exceed	exceed	VERB
fuelectenerg-7534	88	12	0.7	0.7	NUM
fuelectenerg-7534	88	13	mm2	mm2	NOUN
fuelectenerg-7534	88	14	.	.	PUNCT
fuelectenerg-7534	89	1	(	(	PUNCT
fuelectenerg-7534	89	2	a	a	X
fuelectenerg-7534	89	3	)	)	PUNCT
fuelectenerg-7534	89	4	(	(	PUNCT
fuelectenerg-7534	89	5	b	b	X
fuelectenerg-7534	89	6	)	)	PUNCT
fuelectenerg-7534	89	7	(	(	PUNCT
fuelectenerg-7534	89	8	c	c	X
fuelectenerg-7534	89	9	)	)	PUNCT
fuelectenerg-7534	89	10	338	338	NUM
fuelectenerg-7534	89	11	g.	g.	NOUN
fuelectenerg-7534	89	12	tagliapietra	tagliapietra	PROPN
fuelectenerg-7534	89	13	,	,	PUNCT
fuelectenerg-7534	89	14	j.	j.	PROPN
fuelectenerg-7534	89	15	iannacci	iannacci	PROPN
fuelectenerg-7534	89	16	another	another	DET
fuelectenerg-7534	89	17	design	design	NOUN
fuelectenerg-7534	89	18	has	have	AUX
fuelectenerg-7534	89	19	been	be	AUX
fuelectenerg-7534	89	20	simulated	simulate	VERB
fuelectenerg-7534	89	21	in	in	ADP
fuelectenerg-7534	89	22	[	[	X
fuelectenerg-7534	89	23	18	18	NUM
fuelectenerg-7534	89	24	]	]	PUNCT
fuelectenerg-7534	89	25	,	,	PUNCT
fuelectenerg-7534	89	26	comprising	comprise	VERB
fuelectenerg-7534	89	27	:	:	PUNCT
fuelectenerg-7534	89	28	a	a	DET
fuelectenerg-7534	89	29	cantilever	cantilever	ADJ
fuelectenerg-7534	89	30	vertical	vertical	ADJ
fuelectenerg-7534	89	31	switch	switch	NOUN
fuelectenerg-7534	89	32	,	,	PUNCT
fuelectenerg-7534	89	33	with	with	ADP
fuelectenerg-7534	89	34	serpentine	serpentine	ADJ
fuelectenerg-7534	89	35	shaped	shape	VERB
fuelectenerg-7534	89	36	beams	beam	NOUN
fuelectenerg-7534	89	37	,	,	PUNCT
fuelectenerg-7534	89	38	a	a	DET
fuelectenerg-7534	89	39	center	center	NOUN
fuelectenerg-7534	89	40	membrane	membrane	NOUN
fuelectenerg-7534	89	41	and	and	CCONJ
fuelectenerg-7534	89	42	two	two	NUM
fuelectenerg-7534	89	43	free	free	ADJ
fuelectenerg-7534	89	44	ends	end	NOUN
fuelectenerg-7534	89	45	(	(	PUNCT
fuelectenerg-7534	89	46	contacts	contact	NOUN
fuelectenerg-7534	89	47	)	)	PUNCT
fuelectenerg-7534	89	48	provided	provide	VERB
fuelectenerg-7534	89	49	with	with	ADP
fuelectenerg-7534	89	50	holes	hole	NOUN
fuelectenerg-7534	89	51	.	.	PUNCT
fuelectenerg-7534	90	1	the	the	DET
fuelectenerg-7534	90	2	presence	presence	NOUN
fuelectenerg-7534	90	3	of	of	ADP
fuelectenerg-7534	90	4	holes	hole	NOUN
fuelectenerg-7534	90	5	on	on	ADP
fuelectenerg-7534	90	6	membrane	membrane	NOUN
fuelectenerg-7534	90	7	and	and	CCONJ
fuelectenerg-7534	90	8	free	free	ADJ
fuelectenerg-7534	90	9	ends	end	NOUN
fuelectenerg-7534	90	10	,	,	PUNCT
fuelectenerg-7534	90	11	a	a	DET
fuelectenerg-7534	90	12	2.4	2.4	NUM
fuelectenerg-7534	90	13	μm	μm	NOUN
fuelectenerg-7534	90	14	air	air	NOUN
fuelectenerg-7534	90	15	gap	gap	NOUN
fuelectenerg-7534	90	16	,	,	PUNCT
fuelectenerg-7534	90	17	the	the	DET
fuelectenerg-7534	90	18	choice	choice	NOUN
fuelectenerg-7534	90	19	of	of	ADP
fuelectenerg-7534	90	20	material	material	NOUN
fuelectenerg-7534	90	21	and	and	CCONJ
fuelectenerg-7534	90	22	serpentine	serpentine	ADJ
fuelectenerg-7534	90	23	shaped	shape	VERB
fuelectenerg-7534	90	24	beams	beam	NOUN
fuelectenerg-7534	90	25	allowed	allow	VERB
fuelectenerg-7534	90	26	authors	author	NOUN
fuelectenerg-7534	90	27	to	to	PART
fuelectenerg-7534	90	28	reach	reach	VERB
fuelectenerg-7534	90	29	a	a	DET
fuelectenerg-7534	90	30	simulated	simulate	VERB
fuelectenerg-7534	90	31	low	low	ADJ
fuelectenerg-7534	90	32	actuation	actuation	NOUN
fuelectenerg-7534	90	33	voltage	voltage	NOUN
fuelectenerg-7534	90	34	and	and	CCONJ
fuelectenerg-7534	90	35	commendable	commendable	ADJ
fuelectenerg-7534	90	36	switch	switch	NOUN
fuelectenerg-7534	90	37	-	-	PUNCT
fuelectenerg-7534	90	38	on	on	ADP
fuelectenerg-7534	90	39	time	time	NOUN
fuelectenerg-7534	90	40	of	of	ADP
fuelectenerg-7534	90	41	55	55	NUM
fuelectenerg-7534	90	42	μs	μs	NOUN
fuelectenerg-7534	90	43	.	.	PUNCT
fuelectenerg-7534	91	1	moreover	moreover	ADV
fuelectenerg-7534	91	2	,	,	PUNCT
fuelectenerg-7534	91	3	the	the	DET
fuelectenerg-7534	91	4	presence	presence	NOUN
fuelectenerg-7534	91	5	of	of	ADP
fuelectenerg-7534	91	6	two	two	NUM
fuelectenerg-7534	91	7	contact	contact	NOUN
fuelectenerg-7534	91	8	points	point	NOUN
fuelectenerg-7534	91	9	is	be	AUX
fuelectenerg-7534	91	10	intended	intend	VERB
fuelectenerg-7534	91	11	to	to	PART
fuelectenerg-7534	91	12	increase	increase	VERB
fuelectenerg-7534	91	13	both	both	DET
fuelectenerg-7534	91	14	reliability	reliability	NOUN
fuelectenerg-7534	91	15	and	and	CCONJ
fuelectenerg-7534	91	16	current	current	ADJ
fuelectenerg-7534	91	17	-	-	PUNCT
fuelectenerg-7534	91	18	carrying	carry	VERB
fuelectenerg-7534	91	19	capabilities	capability	NOUN
fuelectenerg-7534	91	20	of	of	ADP
fuelectenerg-7534	91	21	the	the	DET
fuelectenerg-7534	91	22	device	device	NOUN
fuelectenerg-7534	91	23	,	,	PUNCT
fuelectenerg-7534	91	24	decreasing	decrease	VERB
fuelectenerg-7534	91	25	the	the	DET
fuelectenerg-7534	91	26	occurrence	occurrence	NOUN
fuelectenerg-7534	91	27	of	of	ADP
fuelectenerg-7534	91	28	detrimental	detrimental	ADJ
fuelectenerg-7534	91	29	surface	surface	NOUN
fuelectenerg-7534	91	30	nonidealities	nonidealitie	NOUN
fuelectenerg-7534	91	31	on	on	ADP
fuelectenerg-7534	91	32	the	the	DET
fuelectenerg-7534	91	33	entire	entire	ADJ
fuelectenerg-7534	91	34	contact	contact	NOUN
fuelectenerg-7534	91	35	area	area	NOUN
fuelectenerg-7534	91	36	.	.	PUNCT
fuelectenerg-7534	92	1	2.2	2.2	NUM
fuelectenerg-7534	92	2	.	.	PUNCT
fuelectenerg-7534	92	3	capacitive	capacitive	ADJ
fuelectenerg-7534	92	4	switches	switch	NOUN
fuelectenerg-7534	92	5	considering	consider	VERB
fuelectenerg-7534	92	6	capacitive	capacitive	ADJ
fuelectenerg-7534	92	7	switches	switch	NOUN
fuelectenerg-7534	92	8	,	,	PUNCT
fuelectenerg-7534	92	9	significant	significant	ADJ
fuelectenerg-7534	92	10	contributions	contribution	NOUN
fuelectenerg-7534	92	11	have	have	AUX
fuelectenerg-7534	92	12	been	be	AUX
fuelectenerg-7534	92	13	proposed	propose	VERB
fuelectenerg-7534	92	14	by	by	ADP
fuelectenerg-7534	92	15	[	[	X
fuelectenerg-7534	92	16	19][20][21	19][20][21	X
fuelectenerg-7534	92	17	]	]	X
fuelectenerg-7534	92	18	,	,	PUNCT
fuelectenerg-7534	92	19	covering	cover	VERB
fuelectenerg-7534	92	20	different	different	ADJ
fuelectenerg-7534	92	21	aspects	aspect	NOUN
fuelectenerg-7534	92	22	.	.	PUNCT
fuelectenerg-7534	93	1	the	the	DET
fuelectenerg-7534	93	2	first	first	ADJ
fuelectenerg-7534	93	3	one	one	NUM
fuelectenerg-7534	93	4	concerns	concern	NOUN
fuelectenerg-7534	93	5	a	a	DET
fuelectenerg-7534	93	6	4	4	NUM
fuelectenerg-7534	93	7	-	-	PUNCT
fuelectenerg-7534	93	8	beams	beam	NOUN
fuelectenerg-7534	93	9	cantilever	cantilever	NOUN
fuelectenerg-7534	93	10	structure	structure	NOUN
fuelectenerg-7534	93	11	:	:	PUNCT
fuelectenerg-7534	93	12	each	each	DET
fuelectenerg-7534	93	13	beam	beam	NOUN
fuelectenerg-7534	93	14	is	be	AUX
fuelectenerg-7534	93	15	placed	place	VERB
fuelectenerg-7534	93	16	on	on	ADP
fuelectenerg-7534	93	17	a	a	DET
fuelectenerg-7534	93	18	corner	corner	NOUN
fuelectenerg-7534	93	19	of	of	ADP
fuelectenerg-7534	93	20	a	a	DET
fuelectenerg-7534	93	21	square	square	ADJ
fuelectenerg-7534	93	22	area	area	NOUN
fuelectenerg-7534	93	23	,	,	PUNCT
fuelectenerg-7534	93	24	each	each	DET
fuelectenerg-7534	93	25	one	one	NOUN
fuelectenerg-7534	93	26	provided	provide	VERB
fuelectenerg-7534	93	27	with	with	ADP
fuelectenerg-7534	93	28	its	its	PRON
fuelectenerg-7534	93	29	shared	share	VERB
fuelectenerg-7534	93	30	tether	tether	NOUN
fuelectenerg-7534	93	31	and	and	CCONJ
fuelectenerg-7534	93	32	two	two	NUM
fuelectenerg-7534	93	33	springs	spring	NOUN
fuelectenerg-7534	93	34	.	.	PUNCT
fuelectenerg-7534	94	1	stability	stability	NOUN
fuelectenerg-7534	94	2	of	of	ADP
fuelectenerg-7534	94	3	the	the	DET
fuelectenerg-7534	94	4	structure	structure	NOUN
fuelectenerg-7534	94	5	against	against	ADP
fuelectenerg-7534	94	6	stress	stress	NOUN
fuelectenerg-7534	94	7	gradient	gradient	NOUN
fuelectenerg-7534	94	8	is	be	AUX
fuelectenerg-7534	94	9	guaranteed	guarantee	VERB
fuelectenerg-7534	94	10	by	by	ADP
fuelectenerg-7534	94	11	a	a	DET
fuelectenerg-7534	94	12	central	central	ADJ
fuelectenerg-7534	94	13	joint	joint	NOUN
fuelectenerg-7534	94	14	.	.	PUNCT
fuelectenerg-7534	95	1	underlying	underlie	VERB
fuelectenerg-7534	95	2	dimples	dimple	NOUN
fuelectenerg-7534	95	3	are	be	AUX
fuelectenerg-7534	95	4	employed	employ	VERB
fuelectenerg-7534	95	5	to	to	PART
fuelectenerg-7534	95	6	prevent	prevent	VERB
fuelectenerg-7534	95	7	a	a	DET
fuelectenerg-7534	95	8	collapse	collapse	NOUN
fuelectenerg-7534	95	9	of	of	ADP
fuelectenerg-7534	95	10	the	the	DET
fuelectenerg-7534	95	11	structure	structure	NOUN
fuelectenerg-7534	95	12	and	and	CCONJ
fuelectenerg-7534	95	13	instability	instability	NOUN
fuelectenerg-7534	95	14	of	of	ADP
fuelectenerg-7534	95	15	capacitance	capacitance	NOUN
fuelectenerg-7534	95	16	value	value	NOUN
fuelectenerg-7534	95	17	.	.	PUNCT
fuelectenerg-7534	96	1	fabricated	fabricate	VERB
fuelectenerg-7534	96	2	on	on	ADP
fuelectenerg-7534	96	3	quartz	quartz	NOUN
fuelectenerg-7534	96	4	substrate	substrate	NOUN
fuelectenerg-7534	96	5	,	,	PUNCT
fuelectenerg-7534	96	6	this	this	DET
fuelectenerg-7534	96	7	400x400	400x400	NOUN
fuelectenerg-7534	96	8	μm2	μm2	NOUN
fuelectenerg-7534	96	9	device	device	NOUN
fuelectenerg-7534	96	10	has	have	VERB
fuelectenerg-7534	96	11	a	a	DET
fuelectenerg-7534	96	12	switch	switch	VERB
fuelectenerg-7534	96	13	-	-	PUNCT
fuelectenerg-7534	96	14	on	on	ADP
fuelectenerg-7534	96	15	time	time	NOUN
fuelectenerg-7534	96	16	of	of	ADP
fuelectenerg-7534	96	17	55	55	NUM
fuelectenerg-7534	96	18	μs	μs	NOUN
fuelectenerg-7534	96	19	.	.	PUNCT
fuelectenerg-7534	97	1	besides	besides	SCONJ
fuelectenerg-7534	97	2	the	the	DET
fuelectenerg-7534	97	3	original	original	ADJ
fuelectenerg-7534	97	4	design	design	NOUN
fuelectenerg-7534	97	5	,	,	PUNCT
fuelectenerg-7534	97	6	depicted	depict	VERB
fuelectenerg-7534	97	7	in	in	ADP
fuelectenerg-7534	97	8	figure	figure	NOUN
fuelectenerg-7534	97	9	2a	2a	NUM
fuelectenerg-7534	97	10	,	,	PUNCT
fuelectenerg-7534	97	11	such	such	ADJ
fuelectenerg-7534	97	12	work	work	NOUN
fuelectenerg-7534	97	13	is	be	AUX
fuelectenerg-7534	97	14	remarkable	remarkable	ADJ
fuelectenerg-7534	97	15	in	in	ADP
fuelectenerg-7534	97	16	terms	term	NOUN
fuelectenerg-7534	97	17	of	of	ADP
fuelectenerg-7534	97	18	power	power	NOUN
fuelectenerg-7534	97	19	handling	handle	VERB
fuelectenerg-7534	97	20	capabilities	capability	NOUN
fuelectenerg-7534	97	21	:	:	PUNCT
fuelectenerg-7534	97	22	the	the	DET
fuelectenerg-7534	97	23	device	device	NOUN
fuelectenerg-7534	97	24	has	have	AUX
fuelectenerg-7534	97	25	been	be	AUX
fuelectenerg-7534	97	26	characterized	characterize	VERB
fuelectenerg-7534	97	27	in	in	ADP
fuelectenerg-7534	97	28	its	its	PRON
fuelectenerg-7534	97	29	pull	pull	NOUN
fuelectenerg-7534	97	30	-	-	PUNCT
fuelectenerg-7534	97	31	in	in	NOUN
fuelectenerg-7534	97	32	and	and	CCONJ
fuelectenerg-7534	97	33	de	de	ADJ
fuelectenerg-7534	97	34	-	-	NOUN
fuelectenerg-7534	97	35	actuation	actuation	NOUN
fuelectenerg-7534	97	36	voltage	voltage	NOUN
fuelectenerg-7534	97	37	,	,	PUNCT
fuelectenerg-7534	97	38	showing	show	VERB
fuelectenerg-7534	97	39	acceptable	acceptable	ADJ
fuelectenerg-7534	97	40	variations	variation	NOUN
fuelectenerg-7534	97	41	within	within	ADP
fuelectenerg-7534	97	42	(	(	PUNCT
fuelectenerg-7534	97	43	1	1	NUM
fuelectenerg-7534	97	44	-	-	SYM
fuelectenerg-7534	97	45	12	12	NUM
fuelectenerg-7534	97	46	)	)	PUNCT
fuelectenerg-7534	97	47	w.	w.	NOUN
fuelectenerg-7534	97	48	hot	hot	ADJ
fuelectenerg-7534	97	49	switching	switching	NOUN
fuelectenerg-7534	97	50	conditions	condition	NOUN
fuelectenerg-7534	97	51	are	be	AUX
fuelectenerg-7534	97	52	also	also	ADV
fuelectenerg-7534	97	53	evaluated	evaluate	VERB
fuelectenerg-7534	97	54	,	,	PUNCT
fuelectenerg-7534	97	55	demonstrating	demonstrate	VERB
fuelectenerg-7534	97	56	little	little	ADJ
fuelectenerg-7534	97	57	sensitivity	sensitivity	NOUN
fuelectenerg-7534	97	58	of	of	ADP
fuelectenerg-7534	97	59	the	the	DET
fuelectenerg-7534	97	60	capacitance	capacitance	NOUN
fuelectenerg-7534	97	61	to	to	ADP
fuelectenerg-7534	97	62	temperature	temperature	NOUN
fuelectenerg-7534	97	63	variations	variation	NOUN
fuelectenerg-7534	97	64	within	within	ADP
fuelectenerg-7534	97	65	25	25	NUM
fuelectenerg-7534	97	66	-	-	SYM
fuelectenerg-7534	97	67	125	125	NUM
fuelectenerg-7534	97	68	°	°	NOUN
fuelectenerg-7534	97	69	c	c	NOUN
fuelectenerg-7534	97	70	.	.	PUNCT
fuelectenerg-7534	97	71	focused	focus	VERB
fuelectenerg-7534	97	72	on	on	ADP
fuelectenerg-7534	97	73	ka	ka	NOUN
fuelectenerg-7534	97	74	-	-	NOUN
fuelectenerg-7534	97	75	band	band	NOUN
fuelectenerg-7534	97	76	,	,	PUNCT
fuelectenerg-7534	97	77	and	and	CCONJ
fuelectenerg-7534	97	78	on	on	ADP
fuelectenerg-7534	97	79	a	a	DET
fuelectenerg-7534	97	80	design	design	NOUN
fuelectenerg-7534	97	81	minimally	minimally	ADV
fuelectenerg-7534	97	82	affected	affect	VERB
fuelectenerg-7534	97	83	by	by	ADP
fuelectenerg-7534	97	84	hard	hard	ADJ
fuelectenerg-7534	97	85	fabrication	fabrication	NOUN
fuelectenerg-7534	97	86	temperatures	temperature	NOUN
fuelectenerg-7534	97	87	,	,	PUNCT
fuelectenerg-7534	97	88	[	[	X
fuelectenerg-7534	97	89	20	20	NUM
fuelectenerg-7534	97	90	]	]	PUNCT
fuelectenerg-7534	97	91	proposes	propose	VERB
fuelectenerg-7534	97	92	a	a	DET
fuelectenerg-7534	97	93	folded	fold	VERB
fuelectenerg-7534	97	94	-	-	PUNCT
fuelectenerg-7534	97	95	leg	leg	NOUN
fuelectenerg-7534	97	96	structure	structure	NOUN
fuelectenerg-7534	97	97	characterized	characterize	VERB
fuelectenerg-7534	97	98	after	after	ADP
fuelectenerg-7534	97	99	packaging	packaging	NOUN
fuelectenerg-7534	97	100	process	process	NOUN
fuelectenerg-7534	97	101	.	.	PUNCT
fuelectenerg-7534	98	1	both	both	PRON
fuelectenerg-7534	98	2	actuation	actuation	NOUN
fuelectenerg-7534	98	3	voltage	voltage	NOUN
fuelectenerg-7534	98	4	and	and	CCONJ
fuelectenerg-7534	98	5	up	up	ADP
fuelectenerg-7534	98	6	-	-	PUNCT
fuelectenerg-7534	98	7	state	state	NOUN
fuelectenerg-7534	98	8	capacitance	capacitance	NOUN
fuelectenerg-7534	98	9	exhibited	exhibit	VERB
fuelectenerg-7534	98	10	minimal	minimal	ADJ
fuelectenerg-7534	98	11	changes	change	NOUN
fuelectenerg-7534	98	12	after	after	ADP
fuelectenerg-7534	98	13	200	200	NUM
fuelectenerg-7534	98	14	°	°	NOUN
fuelectenerg-7534	98	15	c	c	NOUN
fuelectenerg-7534	98	16	thermal	thermal	ADJ
fuelectenerg-7534	98	17	treatment	treatment	NOUN
fuelectenerg-7534	98	18	,	,	PUNCT
fuelectenerg-7534	98	19	demonstrating	demonstrate	VERB
fuelectenerg-7534	98	20	a	a	DET
fuelectenerg-7534	98	21	stable	stable	ADJ
fuelectenerg-7534	98	22	behavior	behavior	NOUN
fuelectenerg-7534	98	23	of	of	ADP
fuelectenerg-7534	98	24	such	such	ADJ
fuelectenerg-7534	98	25	quartz	quartz	NOUN
fuelectenerg-7534	98	26	-	-	PUNCT
fuelectenerg-7534	98	27	based	base	VERB
fuelectenerg-7534	98	28	device	device	NOUN
fuelectenerg-7534	98	29	during	during	ADP
fuelectenerg-7534	98	30	the	the	DET
fuelectenerg-7534	98	31	fabrication	fabrication	NOUN
fuelectenerg-7534	98	32	process	process	NOUN
fuelectenerg-7534	98	33	.	.	PUNCT
fuelectenerg-7534	99	1	equally	equally	ADV
fuelectenerg-7534	99	2	focusing	focus	VERB
fuelectenerg-7534	99	3	on	on	ADP
fuelectenerg-7534	99	4	ka	ka	NOUN
fuelectenerg-7534	99	5	-	-	NOUN
fuelectenerg-7534	99	6	band	band	NOUN
fuelectenerg-7534	99	7	,	,	PUNCT
fuelectenerg-7534	99	8	[	[	X
fuelectenerg-7534	99	9	21	21	NUM
fuelectenerg-7534	99	10	]	]	PUNCT
fuelectenerg-7534	99	11	offers	offer	VERB
fuelectenerg-7534	99	12	a	a	DET
fuelectenerg-7534	99	13	device	device	NOUN
fuelectenerg-7534	99	14	provided	provide	VERB
fuelectenerg-7534	99	15	with	with	ADP
fuelectenerg-7534	99	16	an	an	DET
fuelectenerg-7534	99	17	actuation	actuation	NOUN
fuelectenerg-7534	99	18	electrode	electrode	NOUN
fuelectenerg-7534	99	19	on	on	ADP
fuelectenerg-7534	99	20	both	both	DET
fuelectenerg-7534	99	21	sides	side	NOUN
fuelectenerg-7534	99	22	of	of	ADP
fuelectenerg-7534	99	23	signal	signal	ADJ
fuelectenerg-7534	99	24	line	line	NOUN
fuelectenerg-7534	99	25	.	.	PUNCT
fuelectenerg-7534	100	1	vertical	vertical	ADJ
fuelectenerg-7534	100	2	movable	movable	ADJ
fuelectenerg-7534	100	3	membrane	membrane	NOUN
fuelectenerg-7534	100	4	actuates	actuate	NOUN
fuelectenerg-7534	100	5	in	in	ADP
fuelectenerg-7534	100	6	just	just	ADV
fuelectenerg-7534	100	7	15	15	NUM
fuelectenerg-7534	100	8	μs	μs	NUM
fuelectenerg-7534	100	9	,	,	PUNCT
fuelectenerg-7534	100	10	and	and	CCONJ
fuelectenerg-7534	100	11	it	it	PRON
fuelectenerg-7534	100	12	features	feature	VERB
fuelectenerg-7534	100	13	large	large	ADJ
fuelectenerg-7534	100	14	perforated	perforate	VERB
fuelectenerg-7534	100	15	areas	area	NOUN
fuelectenerg-7534	100	16	between	between	ADP
fuelectenerg-7534	100	17	surfaces	surface	NOUN
fuelectenerg-7534	100	18	devoted	devote	VERB
fuelectenerg-7534	100	19	to	to	ADP
fuelectenerg-7534	100	20	actuation	actuation	NOUN
fuelectenerg-7534	100	21	and	and	CCONJ
fuelectenerg-7534	100	22	capacitive	capacitive	ADJ
fuelectenerg-7534	100	23	coupling	coupling	NOUN
fuelectenerg-7534	100	24	,	,	PUNCT
fuelectenerg-7534	100	25	connected	connect	VERB
fuelectenerg-7534	100	26	to	to	ADP
fuelectenerg-7534	100	27	cpw	cpw	NOUN
fuelectenerg-7534	100	28	ground	ground	NOUN
fuelectenerg-7534	100	29	by	by	ADP
fuelectenerg-7534	100	30	meandered	meandered	ADJ
fuelectenerg-7534	100	31	beams	beam	NOUN
fuelectenerg-7534	100	32	.	.	PUNCT
fuelectenerg-7534	101	1	as	as	SCONJ
fuelectenerg-7534	101	2	indicated	indicate	VERB
fuelectenerg-7534	101	3	by	by	ADP
fuelectenerg-7534	101	4	table	table	NOUN
fuelectenerg-7534	101	5	2	2	NUM
fuelectenerg-7534	101	6	,	,	PUNCT
fuelectenerg-7534	101	7	measured	measure	VERB
fuelectenerg-7534	101	8	electrical	electrical	ADJ
fuelectenerg-7534	101	9	parameters	parameter	NOUN
fuelectenerg-7534	101	10	are	be	AUX
fuelectenerg-7534	101	11	remarkable	remarkable	ADJ
fuelectenerg-7534	101	12	,	,	PUNCT
fuelectenerg-7534	101	13	and	and	CCONJ
fuelectenerg-7534	101	14	this	this	PRON
fuelectenerg-7534	101	15	is	be	AUX
fuelectenerg-7534	101	16	also	also	ADV
fuelectenerg-7534	101	17	due	due	ADJ
fuelectenerg-7534	101	18	to	to	ADP
fuelectenerg-7534	101	19	the	the	DET
fuelectenerg-7534	101	20	high	high	ADJ
fuelectenerg-7534	101	21	capacitance	capacitance	NOUN
fuelectenerg-7534	101	22	ratio	ratio	NOUN
fuelectenerg-7534	101	23	of	of	ADP
fuelectenerg-7534	101	24	this	this	DET
fuelectenerg-7534	101	25	roughly	roughly	ADV
fuelectenerg-7534	101	26	1	1	NUM
fuelectenerg-7534	101	27	mm2	mm2	NOUN
fuelectenerg-7534	101	28	device	device	NOUN
fuelectenerg-7534	101	29	,	,	PUNCT
fuelectenerg-7534	101	30	fabricated	fabricate	VERB
fuelectenerg-7534	101	31	on	on	ADP
fuelectenerg-7534	101	32	high	high	ADJ
fuelectenerg-7534	101	33	resistivity	resistivity	NOUN
fuelectenerg-7534	101	34	silicon	silicon	NOUN
fuelectenerg-7534	101	35	.	.	PUNCT
fuelectenerg-7534	102	1	the	the	DET
fuelectenerg-7534	102	2	implementation	implementation	NOUN
fuelectenerg-7534	102	3	proposed	propose	VERB
fuelectenerg-7534	102	4	in	in	ADP
fuelectenerg-7534	102	5	[	[	X
fuelectenerg-7534	102	6	24	24	NUM
fuelectenerg-7534	102	7	]	]	PUNCT
fuelectenerg-7534	102	8	is	be	AUX
fuelectenerg-7534	102	9	marked	mark	VERB
fuelectenerg-7534	102	10	by	by	ADP
fuelectenerg-7534	102	11	remarkable	remarkable	ADJ
fuelectenerg-7534	102	12	performances	performance	NOUN
fuelectenerg-7534	102	13	as	as	ADV
fuelectenerg-7534	102	14	well	well	ADV
fuelectenerg-7534	102	15	,	,	PUNCT
fuelectenerg-7534	102	16	since	since	SCONJ
fuelectenerg-7534	102	17	it	it	PRON
fuelectenerg-7534	102	18	exhibits	exhibit	VERB
fuelectenerg-7534	102	19	minimal	minimal	ADJ
fuelectenerg-7534	102	20	insertion	insertion	NOUN
fuelectenerg-7534	102	21	loss	loss	NOUN
fuelectenerg-7534	102	22	along	along	ADP
fuelectenerg-7534	102	23	a	a	DET
fuelectenerg-7534	102	24	wide	wide	ADJ
fuelectenerg-7534	102	25	frequency	frequency	NOUN
fuelectenerg-7534	102	26	range	range	NOUN
fuelectenerg-7534	102	27	,	,	PUNCT
fuelectenerg-7534	102	28	with	with	ADP
fuelectenerg-7534	102	29	a	a	DET
fuelectenerg-7534	102	30	reduced	reduce	VERB
fuelectenerg-7534	102	31	actuation	actuation	NOUN
fuelectenerg-7534	102	32	voltage	voltage	NOUN
fuelectenerg-7534	102	33	(	(	PUNCT
fuelectenerg-7534	102	34	3.5	3.5	NUM
fuelectenerg-7534	102	35	v	v	NOUN
fuelectenerg-7534	102	36	)	)	PUNCT
fuelectenerg-7534	102	37	.	.	PUNCT
fuelectenerg-7534	103	1	in	in	ADP
fuelectenerg-7534	103	2	fact	fact	NOUN
fuelectenerg-7534	103	3	,	,	PUNCT
fuelectenerg-7534	103	4	when	when	SCONJ
fuelectenerg-7534	103	5	all	all	DET
fuelectenerg-7534	103	6	its	its	PRON
fuelectenerg-7534	103	7	membranes	membrane	NOUN
fuelectenerg-7534	103	8	are	be	AUX
fuelectenerg-7534	103	9	actuated	actuate	VERB
fuelectenerg-7534	103	10	,	,	PUNCT
fuelectenerg-7534	103	11	an	an	DET
fuelectenerg-7534	103	12	insertion	insertion	NOUN
fuelectenerg-7534	103	13	loss	loss	NOUN
fuelectenerg-7534	103	14	smaller	small	ADJ
fuelectenerg-7534	103	15	than	than	ADP
fuelectenerg-7534	103	16	0.1	0.1	NUM
fuelectenerg-7534	103	17	db	db	NOUN
fuelectenerg-7534	103	18	is	be	AUX
fuelectenerg-7534	103	19	achievable	achievable	ADJ
fuelectenerg-7534	103	20	in	in	ADP
fuelectenerg-7534	103	21	the	the	DET
fuelectenerg-7534	103	22	(	(	PUNCT
fuelectenerg-7534	103	23	0	0	NUM
fuelectenerg-7534	103	24	-	-	SYM
fuelectenerg-7534	103	25	25	25	NUM
fuelectenerg-7534	103	26	)	)	PUNCT
fuelectenerg-7534	103	27	ghz	ghz	NOUN
fuelectenerg-7534	103	28	range	range	NOUN
fuelectenerg-7534	103	29	.	.	PUNCT
fuelectenerg-7534	104	1	the	the	DET
fuelectenerg-7534	104	2	simulated	simulated	ADJ
fuelectenerg-7534	104	3	640x820	640x820	NOUN
fuelectenerg-7534	104	4	μm2	μm2	NOUN
fuelectenerg-7534	104	5	structure	structure	NOUN
fuelectenerg-7534	104	6	is	be	AUX
fuelectenerg-7534	104	7	based	base	VERB
fuelectenerg-7534	104	8	on	on	ADP
fuelectenerg-7534	104	9	silicon	silicon	NOUN
fuelectenerg-7534	104	10	substrate	substrate	NOUN
fuelectenerg-7534	104	11	and	and	CCONJ
fuelectenerg-7534	104	12	it	it	PRON
fuelectenerg-7534	104	13	is	be	AUX
fuelectenerg-7534	104	14	embodied	embody	VERB
fuelectenerg-7534	104	15	in	in	ADP
fuelectenerg-7534	104	16	a	a	DET
fuelectenerg-7534	104	17	cpw	cpw	NOUN
fuelectenerg-7534	104	18	configuration	configuration	NOUN
fuelectenerg-7534	104	19	with	with	ADP
fuelectenerg-7534	104	20	four	four	NUM
fuelectenerg-7534	104	21	cantilever	cantilever	NOUN
fuelectenerg-7534	104	22	membranes	membrane	NOUN
fuelectenerg-7534	104	23	,	,	PUNCT
fuelectenerg-7534	104	24	each	each	DET
fuelectenerg-7534	104	25	one	one	NOUN
fuelectenerg-7534	104	26	provided	provide	VERB
fuelectenerg-7534	104	27	with	with	ADP
fuelectenerg-7534	104	28	a	a	DET
fuelectenerg-7534	104	29	single	single	ADJ
fuelectenerg-7534	104	30	serpentine	serpentine	ADJ
fuelectenerg-7534	104	31	shaped	shape	VERB
fuelectenerg-7534	104	32	beam	beam	NOUN
fuelectenerg-7534	104	33	.	.	PUNCT
fuelectenerg-7534	105	1	activation	activation	NOUN
fuelectenerg-7534	105	2	of	of	ADP
fuelectenerg-7534	105	3	a	a	DET
fuelectenerg-7534	105	4	single	single	ADJ
fuelectenerg-7534	105	5	or	or	CCONJ
fuelectenerg-7534	105	6	multiple	multiple	ADJ
fuelectenerg-7534	105	7	membrane	membrane	NOUN
fuelectenerg-7534	105	8	determines	determine	VERB
fuelectenerg-7534	105	9	different	different	ADJ
fuelectenerg-7534	105	10	configurations	configuration	NOUN
fuelectenerg-7534	105	11	,	,	PUNCT
fuelectenerg-7534	105	12	in	in	ADP
fuelectenerg-7534	105	13	which	which	PRON
fuelectenerg-7534	105	14	return	return	NOUN
fuelectenerg-7534	105	15	loss	loss	NOUN
fuelectenerg-7534	105	16	is	be	AUX
fuelectenerg-7534	105	17	smaller	small	ADJ
fuelectenerg-7534	105	18	than	than	ADP
fuelectenerg-7534	105	19	-20	-20	NUM
fuelectenerg-7534	105	20	db	db	VERB
fuelectenerg-7534	105	21	along	along	ADP
fuelectenerg-7534	105	22	intervals	interval	NOUN
fuelectenerg-7534	105	23	varying	vary	VERB
fuelectenerg-7534	105	24	from	from	ADP
fuelectenerg-7534	105	25	1.6	1.6	NUM
fuelectenerg-7534	105	26	to	to	ADP
fuelectenerg-7534	105	27	16.1	16.1	NUM
fuelectenerg-7534	105	28	ghz	ghz	NOUN
fuelectenerg-7534	105	29	.	.	PUNCT
fuelectenerg-7534	106	1	targeting	target	VERB
fuelectenerg-7534	106	2	k	k	ADJ
fuelectenerg-7534	106	3	-	-	ADJ
fuelectenerg-7534	106	4	band	band	NOUN
fuelectenerg-7534	106	5	satellite	satellite	NOUN
fuelectenerg-7534	106	6	applications	application	NOUN
fuelectenerg-7534	106	7	,	,	PUNCT
fuelectenerg-7534	106	8	[	[	X
fuelectenerg-7534	106	9	22	22	NUM
fuelectenerg-7534	106	10	]	]	PUNCT
fuelectenerg-7534	106	11	introduces	introduce	VERB
fuelectenerg-7534	106	12	a	a	DET
fuelectenerg-7534	106	13	simple	simple	ADJ
fuelectenerg-7534	106	14	and	and	CCONJ
fuelectenerg-7534	106	15	effective	effective	ADJ
fuelectenerg-7534	106	16	design	design	NOUN
fuelectenerg-7534	106	17	on	on	ADP
fuelectenerg-7534	106	18	silicon	silicon	NOUN
fuelectenerg-7534	106	19	nitride	nitride	NOUN
fuelectenerg-7534	106	20	,	,	PUNCT
fuelectenerg-7534	106	21	simultaneously	simultaneously	ADV
fuelectenerg-7534	106	22	achieving	achieve	VERB
fuelectenerg-7534	106	23	low	low	ADJ
fuelectenerg-7534	106	24	actuation	actuation	NOUN
fuelectenerg-7534	106	25	voltage	voltage	NOUN
fuelectenerg-7534	106	26	(	(	PUNCT
fuelectenerg-7534	106	27	4.7	4.7	NUM
fuelectenerg-7534	106	28	v	v	NOUN
fuelectenerg-7534	106	29	)	)	PUNCT
fuelectenerg-7534	106	30	and	and	CCONJ
fuelectenerg-7534	106	31	insertion	insertion	NOUN
fuelectenerg-7534	106	32	loss	loss	NOUN
fuelectenerg-7534	106	33	(	(	PUNCT
fuelectenerg-7534	106	34	0.3	0.3	NUM
fuelectenerg-7534	106	35	db	db	NOUN
fuelectenerg-7534	106	36	)	)	PUNCT
fuelectenerg-7534	106	37	up	up	ADP
fuelectenerg-7534	106	38	to	to	PART
fuelectenerg-7534	106	39	45	45	NUM
fuelectenerg-7534	106	40	ghz	ghz	NOUN
fuelectenerg-7534	106	41	.	.	PUNCT
fuelectenerg-7534	107	1	capitalising	capitalise	VERB
fuelectenerg-7534	107	2	on	on	ADP
fuelectenerg-7534	107	3	meandered	meandered	ADJ
fuelectenerg-7534	107	4	beams	beam	NOUN
fuelectenerg-7534	107	5	,	,	PUNCT
fuelectenerg-7534	107	6	a	a	DET
fuelectenerg-7534	107	7	traditional	traditional	ADJ
fuelectenerg-7534	107	8	rectangular	rectangular	ADJ
fuelectenerg-7534	107	9	perforated	perforate	VERB
fuelectenerg-7534	107	10	membrane	membrane	NOUN
fuelectenerg-7534	107	11	with	with	ADP
fuelectenerg-7534	107	12	stepped	step	VERB
fuelectenerg-7534	107	13	profile	profile	NOUN
fuelectenerg-7534	107	14	,	,	PUNCT
fuelectenerg-7534	107	15	and	and	CCONJ
fuelectenerg-7534	107	16	1.7	1.7	NUM
fuelectenerg-7534	107	17	μm	μm	NOUN
fuelectenerg-7534	107	18	air	air	NOUN
fuelectenerg-7534	107	19	gap	gap	NOUN
fuelectenerg-7534	107	20	,	,	PUNCT
fuelectenerg-7534	107	21	a	a	DET
fuelectenerg-7534	107	22	structure	structure	NOUN
fuelectenerg-7534	107	23	with	with	ADP
fuelectenerg-7534	107	24	175	175	NUM
fuelectenerg-7534	107	25	μs	μs	NOUN
fuelectenerg-7534	107	26	switch	switch	NOUN
fuelectenerg-7534	107	27	-	-	PUNCT
fuelectenerg-7534	107	28	on	on	ADP
fuelectenerg-7534	107	29	time	time	NOUN
fuelectenerg-7534	107	30	and	and	CCONJ
fuelectenerg-7534	107	31	high	high	ADJ
fuelectenerg-7534	107	32	capacitance	capacitance	NOUN
fuelectenerg-7534	107	33	ratio	ratio	NOUN
fuelectenerg-7534	107	34	(	(	PUNCT
fuelectenerg-7534	107	35	132	132	NUM
fuelectenerg-7534	107	36	)	)	PUNCT
fuelectenerg-7534	107	37	is	be	AUX
fuelectenerg-7534	107	38	obtained	obtain	VERB
fuelectenerg-7534	107	39	.	.	PUNCT
fuelectenerg-7534	108	1	a	a	DET
fuelectenerg-7534	108	2	comprehensive	comprehensive	ADJ
fuelectenerg-7534	108	3	overview	overview	NOUN
fuelectenerg-7534	108	4	of	of	ADP
fuelectenerg-7534	108	5	recent	recent	ADJ
fuelectenerg-7534	108	6	developments	development	NOUN
fuelectenerg-7534	108	7	in	in	ADP
fuelectenerg-7534	108	8	rf	rf	ADJ
fuelectenerg-7534	108	9	-	-	PUNCT
fuelectenerg-7534	108	10	mems	mems	ADJ
fuelectenerg-7534	108	11	technology	technology	NOUN
fuelectenerg-7534	108	12	339	339	NUM
fuelectenerg-7534	108	13	(	(	PUNCT
fuelectenerg-7534	108	14	a	a	NOUN
fuelectenerg-7534	108	15	)	)	PUNCT
fuelectenerg-7534	108	16	(	(	PUNCT
fuelectenerg-7534	108	17	b	b	X
fuelectenerg-7534	108	18	)	)	PUNCT
fuelectenerg-7534	108	19	fig	fig	NOUN
fuelectenerg-7534	108	20	.	.	PUNCT
fuelectenerg-7534	109	1	2	2	NUM
fuelectenerg-7534	109	2	(	(	PUNCT
fuelectenerg-7534	109	3	a	a	NOUN
fuelectenerg-7534	109	4	)	)	PUNCT
fuelectenerg-7534	109	5	top	top	ADJ
fuelectenerg-7534	109	6	view	view	NOUN
fuelectenerg-7534	109	7	of	of	ADP
fuelectenerg-7534	109	8	the	the	DET
fuelectenerg-7534	109	9	concept	concept	NOUN
fuelectenerg-7534	109	10	described	describe	VERB
fuelectenerg-7534	109	11	in	in	ADP
fuelectenerg-7534	109	12	[	[	X
fuelectenerg-7534	109	13	19	19	NUM
fuelectenerg-7534	109	14	]	]	PUNCT
fuelectenerg-7534	109	15	,	,	PUNCT
fuelectenerg-7534	109	16	(	(	PUNCT
fuelectenerg-7534	109	17	b	b	X
fuelectenerg-7534	109	18	)	)	PUNCT
fuelectenerg-7534	109	19	conceptual	conceptual	ADJ
fuelectenerg-7534	109	20	representation	representation	NOUN
fuelectenerg-7534	109	21	of	of	ADP
fuelectenerg-7534	109	22	capacitive	capacitive	ADJ
fuelectenerg-7534	109	23	switch	switch	NOUN
fuelectenerg-7534	109	24	realized	realize	VERB
fuelectenerg-7534	109	25	in	in	ADP
fuelectenerg-7534	109	26	[	[	X
fuelectenerg-7534	109	27	23	23	NUM
fuelectenerg-7534	109	28	]	]	PUNCT
fuelectenerg-7534	109	29	.	.	PUNCT
fuelectenerg-7534	110	1	a	a	DET
fuelectenerg-7534	110	2	more	more	ADV
fuelectenerg-7534	110	3	complex	complex	ADJ
fuelectenerg-7534	110	4	device	device	NOUN
fuelectenerg-7534	110	5	is	be	AUX
fuelectenerg-7534	110	6	suggested	suggest	VERB
fuelectenerg-7534	110	7	by	by	ADP
fuelectenerg-7534	110	8	[	[	X
fuelectenerg-7534	110	9	23	23	NUM
fuelectenerg-7534	110	10	]	]	PUNCT
fuelectenerg-7534	110	11	,	,	PUNCT
fuelectenerg-7534	110	12	combining	combine	VERB
fuelectenerg-7534	110	13	thermal	thermal	ADJ
fuelectenerg-7534	110	14	actuation	actuation	NOUN
fuelectenerg-7534	110	15	and	and	CCONJ
fuelectenerg-7534	110	16	electrostatic	electrostatic	ADJ
fuelectenerg-7534	110	17	holding	holding	NOUN
fuelectenerg-7534	110	18	:	:	PUNCT
fuelectenerg-7534	110	19	the	the	DET
fuelectenerg-7534	110	20	first	first	ADJ
fuelectenerg-7534	110	21	for	for	ADP
fuelectenerg-7534	110	22	the	the	DET
fuelectenerg-7534	110	23	actual	actual	ADJ
fuelectenerg-7534	110	24	downward	downward	ADJ
fuelectenerg-7534	110	25	or	or	CCONJ
fuelectenerg-7534	110	26	upward	upward	ADJ
fuelectenerg-7534	110	27	movement	movement	NOUN
fuelectenerg-7534	110	28	,	,	PUNCT
fuelectenerg-7534	110	29	and	and	CCONJ
fuelectenerg-7534	110	30	the	the	DET
fuelectenerg-7534	110	31	second	second	ADJ
fuelectenerg-7534	110	32	for	for	ADP
fuelectenerg-7534	110	33	holding	hold	VERB
fuelectenerg-7534	110	34	the	the	DET
fuelectenerg-7534	110	35	actuated	actuate	VERB
fuelectenerg-7534	110	36	membrane	membrane	NOUN
fuelectenerg-7534	110	37	.	.	PUNCT
fuelectenerg-7534	111	1	in	in	ADP
fuelectenerg-7534	111	2	this	this	DET
fuelectenerg-7534	111	3	way	way	NOUN
fuelectenerg-7534	111	4	,	,	PUNCT
fuelectenerg-7534	111	5	low	low	ADJ
fuelectenerg-7534	111	6	actuation	actuation	NOUN
fuelectenerg-7534	111	7	voltage	voltage	NOUN
fuelectenerg-7534	111	8	is	be	AUX
fuelectenerg-7534	111	9	achieved	achieve	VERB
fuelectenerg-7534	111	10	,	,	PUNCT
fuelectenerg-7534	111	11	still	still	ADV
fuelectenerg-7534	111	12	involving	involve	VERB
fuelectenerg-7534	111	13	low	low	ADJ
fuelectenerg-7534	111	14	power	power	NOUN
fuelectenerg-7534	111	15	consumption	consumption	NOUN
fuelectenerg-7534	111	16	.	.	PUNCT
fuelectenerg-7534	112	1	as	as	ADV
fuelectenerg-7534	112	2	visible	visible	ADJ
fuelectenerg-7534	112	3	in	in	ADP
fuelectenerg-7534	112	4	figure	figure	NOUN
fuelectenerg-7534	112	5	2c	2c	NOUN
fuelectenerg-7534	112	6	,	,	PUNCT
fuelectenerg-7534	112	7	the	the	DET
fuelectenerg-7534	112	8	moving	move	VERB
fuelectenerg-7534	112	9	membrane	membrane	NOUN
fuelectenerg-7534	112	10	is	be	AUX
fuelectenerg-7534	112	11	composed	compose	VERB
fuelectenerg-7534	112	12	by	by	ADP
fuelectenerg-7534	112	13	two	two	NUM
fuelectenerg-7534	112	14	metal	metal	NOUN
fuelectenerg-7534	112	15	layers	layer	NOUN
fuelectenerg-7534	112	16	:	:	PUNCT
fuelectenerg-7534	112	17	the	the	DET
fuelectenerg-7534	112	18	first	first	ADJ
fuelectenerg-7534	112	19	one	one	NUM
fuelectenerg-7534	112	20	for	for	ADP
fuelectenerg-7534	112	21	upward	upward	ADJ
fuelectenerg-7534	112	22	(	(	PUNCT
fuelectenerg-7534	112	23	c	c	NOUN
fuelectenerg-7534	112	24	and	and	CCONJ
fuelectenerg-7534	112	25	d	d	NOUN
fuelectenerg-7534	112	26	electrodes	electrode	NOUN
fuelectenerg-7534	112	27	)	)	PUNCT
fuelectenerg-7534	112	28	and	and	CCONJ
fuelectenerg-7534	112	29	the	the	DET
fuelectenerg-7534	112	30	second	second	ADJ
fuelectenerg-7534	112	31	for	for	ADP
fuelectenerg-7534	112	32	downward	downward	ADJ
fuelectenerg-7534	112	33	actuation	actuation	NOUN
fuelectenerg-7534	112	34	(	(	PUNCT
fuelectenerg-7534	112	35	a	a	DET
fuelectenerg-7534	112	36	and	and	CCONJ
fuelectenerg-7534	112	37	b	b	NOUN
fuelectenerg-7534	112	38	electrodes	electrode	NOUN
fuelectenerg-7534	112	39	)	)	PUNCT
fuelectenerg-7534	112	40	,	,	PUNCT
fuelectenerg-7534	112	41	with	with	ADP
fuelectenerg-7534	112	42	an	an	DET
fuelectenerg-7534	112	43	interposed	interpose	VERB
fuelectenerg-7534	112	44	dielectric	dielectric	ADJ
fuelectenerg-7534	112	45	layer	layer	NOUN
fuelectenerg-7534	112	46	.	.	PUNCT
fuelectenerg-7534	113	1	the	the	DET
fuelectenerg-7534	113	2	holding	hold	VERB
fuelectenerg-7534	113	3	electrode	electrode	NOUN
fuelectenerg-7534	113	4	(	(	PUNCT
fuelectenerg-7534	113	5	e	e	NOUN
fuelectenerg-7534	113	6	)	)	PUNCT
fuelectenerg-7534	113	7	completes	complete	VERB
fuelectenerg-7534	113	8	the	the	DET
fuelectenerg-7534	113	9	device	device	NOUN
fuelectenerg-7534	113	10	,	,	PUNCT
fuelectenerg-7534	113	11	attracting	attract	VERB
fuelectenerg-7534	113	12	the	the	DET
fuelectenerg-7534	113	13	first	first	ADJ
fuelectenerg-7534	113	14	layer	layer	NOUN
fuelectenerg-7534	113	15	and	and	CCONJ
fuelectenerg-7534	113	16	keeping	keep	VERB
fuelectenerg-7534	113	17	the	the	DET
fuelectenerg-7534	113	18	whole	whole	ADJ
fuelectenerg-7534	113	19	membrane	membrane	NOUN
fuelectenerg-7534	113	20	actuated	actuate	VERB
fuelectenerg-7534	113	21	.	.	PUNCT
fuelectenerg-7534	114	1	this	this	DET
fuelectenerg-7534	114	2	double	double	ADJ
fuelectenerg-7534	114	3	electrothermal	electrothermal	ADJ
fuelectenerg-7534	114	4	mechanism	mechanism	NOUN
fuelectenerg-7534	114	5	is	be	AUX
fuelectenerg-7534	114	6	employed	employ	VERB
fuelectenerg-7534	114	7	also	also	ADV
fuelectenerg-7534	114	8	in	in	ADP
fuelectenerg-7534	114	9	case	case	NOUN
fuelectenerg-7534	114	10	of	of	ADP
fuelectenerg-7534	114	11	stiction	stiction	NOUN
fuelectenerg-7534	114	12	,	,	PUNCT
fuelectenerg-7534	114	13	in	in	ADP
fuelectenerg-7534	114	14	order	order	NOUN
fuelectenerg-7534	114	15	to	to	PART
fuelectenerg-7534	114	16	provide	provide	VERB
fuelectenerg-7534	114	17	additional	additional	ADJ
fuelectenerg-7534	114	18	restoring	restore	VERB
fuelectenerg-7534	114	19	force	force	NOUN
fuelectenerg-7534	114	20	when	when	SCONJ
fuelectenerg-7534	114	21	the	the	DET
fuelectenerg-7534	114	22	membrane	membrane	NOUN
fuelectenerg-7534	114	23	is	be	AUX
fuelectenerg-7534	114	24	stuck	stick	VERB
fuelectenerg-7534	114	25	because	because	SCONJ
fuelectenerg-7534	114	26	of	of	ADP
fuelectenerg-7534	114	27	micro	micro	NOUN
fuelectenerg-7534	114	28	-	-	NOUN
fuelectenerg-7534	114	29	welding	welding	NOUN
fuelectenerg-7534	114	30	or	or	CCONJ
fuelectenerg-7534	114	31	charges	charge	NOUN
fuelectenerg-7534	114	32	trapped	trap	VERB
fuelectenerg-7534	114	33	in	in	ADP
fuelectenerg-7534	114	34	the	the	DET
fuelectenerg-7534	114	35	dielectric	dielectric	NOUN
fuelectenerg-7534	114	36	.	.	PUNCT
fuelectenerg-7534	115	1	in	in	ADP
fuelectenerg-7534	115	2	fact	fact	NOUN
fuelectenerg-7534	115	3	,	,	PUNCT
fuelectenerg-7534	115	4	its	its	PRON
fuelectenerg-7534	115	5	measured	measured	ADJ
fuelectenerg-7534	115	6	electrical	electrical	ADJ
fuelectenerg-7534	115	7	properties	property	NOUN
fuelectenerg-7534	115	8	remained	remain	VERB
fuelectenerg-7534	115	9	constant	constant	ADJ
fuelectenerg-7534	115	10	up	up	ADP
fuelectenerg-7534	115	11	to	to	PART
fuelectenerg-7534	115	12	21	21	NUM
fuelectenerg-7534	115	13	million	million	NUM
fuelectenerg-7534	115	14	cycles	cycle	NOUN
fuelectenerg-7534	115	15	,	,	PUNCT
fuelectenerg-7534	115	16	while	while	SCONJ
fuelectenerg-7534	115	17	no	no	DET
fuelectenerg-7534	115	18	stiction	stiction	NOUN
fuelectenerg-7534	115	19	took	take	VERB
fuelectenerg-7534	115	20	place	place	NOUN
fuelectenerg-7534	115	21	even	even	ADV
fuelectenerg-7534	115	22	after	after	ADP
fuelectenerg-7534	115	23	80	80	NUM
fuelectenerg-7534	115	24	million	million	NUM
fuelectenerg-7534	115	25	cycles	cycle	NOUN
fuelectenerg-7534	115	26	.	.	PUNCT
fuelectenerg-7534	116	1	with	with	ADP
fuelectenerg-7534	116	2	an	an	DET
fuelectenerg-7534	116	3	actuation	actuation	NOUN
fuelectenerg-7534	116	4	and	and	CCONJ
fuelectenerg-7534	116	5	holding	hold	VERB
fuelectenerg-7534	116	6	voltage	voltage	NOUN
fuelectenerg-7534	116	7	of	of	ADP
fuelectenerg-7534	116	8	0.3	0.3	NUM
fuelectenerg-7534	116	9	and	and	CCONJ
fuelectenerg-7534	116	10	15.4	15.4	NUM
fuelectenerg-7534	116	11	v	v	NOUN
fuelectenerg-7534	116	12	,	,	PUNCT
fuelectenerg-7534	116	13	this	this	DET
fuelectenerg-7534	116	14	160x300	160x300	NUM
fuelectenerg-7534	116	15	μm2	μm2	NOUN
fuelectenerg-7534	116	16	device	device	NOUN
fuelectenerg-7534	116	17	demonstrates	demonstrate	VERB
fuelectenerg-7534	116	18	high	high	ADJ
fuelectenerg-7534	116	19	isolation	isolation	NOUN
fuelectenerg-7534	116	20	up	up	ADP
fuelectenerg-7534	116	21	to	to	PART
fuelectenerg-7534	116	22	20	20	NUM
fuelectenerg-7534	116	23	ghz	ghz	NOUN
fuelectenerg-7534	116	24	.	.	PUNCT
fuelectenerg-7534	116	25	table	table	NOUN
fuelectenerg-7534	116	26	2	2	NUM
fuelectenerg-7534	116	27	comparison	comparison	NOUN
fuelectenerg-7534	116	28	between	between	ADP
fuelectenerg-7534	116	29	the	the	DET
fuelectenerg-7534	116	30	different	different	ADJ
fuelectenerg-7534	116	31	discussed	discuss	VERB
fuelectenerg-7534	116	32	realizations	realization	NOUN
fuelectenerg-7534	116	33	,	,	PUNCT
fuelectenerg-7534	116	34	including	include	VERB
fuelectenerg-7534	116	35	ohmic	ohmic	ADJ
fuelectenerg-7534	116	36	and	and	CCONJ
fuelectenerg-7534	116	37	capacitive	capacitive	ADJ
fuelectenerg-7534	116	38	switches	switch	NOUN
fuelectenerg-7534	116	39	.	.	PUNCT
fuelectenerg-7534	117	1	reported	report	VERB
fuelectenerg-7534	117	2	values	value	NOUN
fuelectenerg-7534	117	3	of	of	ADP
fuelectenerg-7534	117	4	return	return	NOUN
fuelectenerg-7534	117	5	loss	loss	NOUN
fuelectenerg-7534	117	6	(	(	PUNCT
fuelectenerg-7534	117	7	s11	s11	NOUN
fuelectenerg-7534	117	8	)	)	PUNCT
fuelectenerg-7534	117	9	,	,	PUNCT
fuelectenerg-7534	117	10	insertion	insertion	NOUN
fuelectenerg-7534	117	11	loss	loss	NOUN
fuelectenerg-7534	117	12	(	(	PUNCT
fuelectenerg-7534	117	13	s12	s12	NOUN
fuelectenerg-7534	117	14	when	when	SCONJ
fuelectenerg-7534	117	15	close	close	ADJ
fuelectenerg-7534	117	16	)	)	PUNCT
fuelectenerg-7534	117	17	,	,	PUNCT
fuelectenerg-7534	117	18	or	or	CCONJ
fuelectenerg-7534	117	19	isolation	isolation	NOUN
fuelectenerg-7534	117	20	(	(	PUNCT
fuelectenerg-7534	117	21	s12	s12	NOUN
fuelectenerg-7534	117	22	when	when	SCONJ
fuelectenerg-7534	117	23	open	open	ADJ
fuelectenerg-7534	117	24	)	)	PUNCT
fuelectenerg-7534	117	25	refer	refer	VERB
fuelectenerg-7534	117	26	to	to	ADP
fuelectenerg-7534	117	27	worst	bad	ADJ
fuelectenerg-7534	117	28	value	value	NOUN
fuelectenerg-7534	117	29	along	along	ADP
fuelectenerg-7534	117	30	the	the	DET
fuelectenerg-7534	117	31	measured	measured	ADJ
fuelectenerg-7534	117	32	interval	interval	NOUN
fuelectenerg-7534	117	33	.	.	PUNCT
fuelectenerg-7534	118	1	work	work	NOUN
fuelectenerg-7534	118	2	type	type	NOUN
fuelectenerg-7534	118	3	measured	measure	VERB
fuelectenerg-7534	118	4	ret	ret	PROPN
fuelectenerg-7534	118	5	.	.	PUNCT
fuelectenerg-7534	118	6	loss	loss	NOUN
fuelectenerg-7534	118	7	ins	ins	PROPN
fuelectenerg-7534	118	8	.	.	PUNCT
fuelectenerg-7534	119	1	loss	loss	NOUN
fuelectenerg-7534	119	2	isolation	isolation	NOUN
fuelectenerg-7534	119	3	actuation	actuation	NOUN
fuelectenerg-7534	119	4	@(ghz	@(ghz	NOUN
fuelectenerg-7534	119	5	)	)	PUNCT
fuelectenerg-7534	119	6	(	(	PUNCT
fuelectenerg-7534	119	7	db	db	NOUN
fuelectenerg-7534	119	8	)	)	PUNCT
fuelectenerg-7534	119	9	(	(	PUNCT
fuelectenerg-7534	119	10	db	db	PROPN
fuelectenerg-7534	119	11	)	)	PUNCT
fuelectenerg-7534	119	12	(	(	PUNCT
fuelectenerg-7534	119	13	db	db	NOUN
fuelectenerg-7534	119	14	)	)	PUNCT
fuelectenerg-7534	119	15	(	(	PUNCT
fuelectenerg-7534	119	16	v	v	NOUN
fuelectenerg-7534	119	17	)	)	PUNCT
fuelectenerg-7534	119	18	[	[	X
fuelectenerg-7534	119	19	13	13	NUM
fuelectenerg-7534	119	20	]	]	X
fuelectenerg-7534	119	21	ohm	ohm	NOUN
fuelectenerg-7534	119	22	0	0	NUM
fuelectenerg-7534	119	23	-	-	SYM
fuelectenerg-7534	119	24	20	20	NUM
fuelectenerg-7534	119	25	25	25	NUM
fuelectenerg-7534	119	26	0.45	0.45	NUM
fuelectenerg-7534	119	27	20	20	NUM
fuelectenerg-7534	119	28	90	90	NUM
fuelectenerg-7534	119	29	[	[	SYM
fuelectenerg-7534	119	30	14	14	NUM
fuelectenerg-7534	119	31	]	]	PUNCT
fuelectenerg-7534	119	32	ohm	ohm	NOUN
fuelectenerg-7534	119	33	140	140	NUM
fuelectenerg-7534	119	34	1.42	1.42	NUM
fuelectenerg-7534	119	35	54.5	54.5	NUM
fuelectenerg-7534	119	36	60	60	NUM
fuelectenerg-7534	120	1	[	[	X
fuelectenerg-7534	120	2	15	15	NUM
fuelectenerg-7534	120	3	]	]	X
fuelectenerg-7534	120	4	ohm	ohm	NOUN
fuelectenerg-7534	120	5	0	0	NUM
fuelectenerg-7534	120	6	-	-	SYM
fuelectenerg-7534	120	7	40	40	NUM
fuelectenerg-7534	120	8	0.48	0.48	NUM
fuelectenerg-7534	120	9	36	36	NUM
fuelectenerg-7534	120	10	60	60	NUM
fuelectenerg-7534	120	11	[	[	X
fuelectenerg-7534	120	12	16	16	NUM
fuelectenerg-7534	120	13	]	]	X
fuelectenerg-7534	120	14	ohm	ohm	NOUN
fuelectenerg-7534	120	15	1	1	NUM
fuelectenerg-7534	120	16	-	-	SYM
fuelectenerg-7534	120	17	40	40	NUM
fuelectenerg-7534	120	18	20.09	20.09	NUM
fuelectenerg-7534	120	19	0.25	0.25	NUM
fuelectenerg-7534	120	20	22.5	22.5	NUM
fuelectenerg-7534	120	21	17.5	17.5	NUM
fuelectenerg-7534	120	22	[	[	X
fuelectenerg-7534	120	23	17	17	NUM
fuelectenerg-7534	120	24	]	]	PUNCT
fuelectenerg-7534	120	25	ohm	ohm	NOUN
fuelectenerg-7534	120	26	3.5&28	3.5&28	NUM
fuelectenerg-7534	120	27	21&11.4	21&11.4	NUM
fuelectenerg-7534	120	28	0.28&2.82	0.28&2.82	NUM
fuelectenerg-7534	120	29	28	28	NUM
fuelectenerg-7534	120	30	90	90	NUM
fuelectenerg-7534	121	1	[	[	SYM
fuelectenerg-7534	121	2	18	18	NUM
fuelectenerg-7534	121	3	]	]	PUNCT
fuelectenerg-7534	121	4	ohm	ohm	NOUN
fuelectenerg-7534	121	5	1	1	NUM
fuelectenerg-7534	121	6	-	-	SYM
fuelectenerg-7534	121	7	40	40	NUM
fuelectenerg-7534	121	8	15	15	NUM
fuelectenerg-7534	121	9	0.6	0.6	NUM
fuelectenerg-7534	121	10	19	19	NUM
fuelectenerg-7534	121	11	3.1	3.1	NUM
fuelectenerg-7534	121	12	[	[	X
fuelectenerg-7534	121	13	19	19	NUM
fuelectenerg-7534	121	14	]	]	PUNCT
fuelectenerg-7534	121	15	cap	cap	NOUN
fuelectenerg-7534	121	16	20	20	NUM
fuelectenerg-7534	121	17	8	8	NUM
fuelectenerg-7534	121	18	1.1	1.1	NUM
fuelectenerg-7534	121	19	12	12	NUM
fuelectenerg-7534	121	20	55	55	NUM
fuelectenerg-7534	121	21	[	[	SYM
fuelectenerg-7534	121	22	20	20	NUM
fuelectenerg-7534	121	23	]	]	PUNCT
fuelectenerg-7534	121	24	cap	cap	NOUN
fuelectenerg-7534	121	25	35	35	NUM
fuelectenerg-7534	121	26	18	18	NUM
fuelectenerg-7534	121	27	0.3	0.3	NUM
fuelectenerg-7534	121	28	35	35	NUM
fuelectenerg-7534	121	29	25	25	NUM
fuelectenerg-7534	121	30	[	[	X
fuelectenerg-7534	121	31	21	21	NUM
fuelectenerg-7534	121	32	]	]	PUNCT
fuelectenerg-7534	121	33	cap	cap	NOUN
fuelectenerg-7534	121	34	35	35	NUM
fuelectenerg-7534	121	35	27	27	NUM
fuelectenerg-7534	121	36	0.29	0.29	NUM
fuelectenerg-7534	121	37	20.5	20.5	NUM
fuelectenerg-7534	121	38	18.3	18.3	NUM
fuelectenerg-7534	121	39	[	[	PUNCT
fuelectenerg-7534	121	40	24	24	NUM
fuelectenerg-7534	121	41	]	]	PUNCT
fuelectenerg-7534	121	42	cap	cap	NOUN
fuelectenerg-7534	121	43	5	5	NUM
fuelectenerg-7534	121	44	28	28	NUM
fuelectenerg-7534	121	45	2	2	NUM
fuelectenerg-7534	121	46	49	49	NUM
fuelectenerg-7534	121	47	3.5	3.5	NUM
fuelectenerg-7534	121	48	[	[	SYM
fuelectenerg-7534	121	49	22	22	NUM
fuelectenerg-7534	121	50	]	]	PUNCT
fuelectenerg-7534	121	51	cap	cap	NOUN
fuelectenerg-7534	121	52	27	27	NUM
fuelectenerg-7534	121	53	13	13	NUM
fuelectenerg-7534	121	54	0.3	0.3	NUM
fuelectenerg-7534	121	55	35	35	NUM
fuelectenerg-7534	121	56	4.7	4.7	NUM
fuelectenerg-7534	122	1	[	[	X
fuelectenerg-7534	122	2	23	23	NUM
fuelectenerg-7534	122	3	]	]	PUNCT
fuelectenerg-7534	122	4	cap	cap	VERB
fuelectenerg-7534	122	5	2.4	2.4	NUM
fuelectenerg-7534	122	6	0.28	0.28	NUM
fuelectenerg-7534	122	7	31	31	NUM
fuelectenerg-7534	122	8	15.4	15.4	NUM
fuelectenerg-7534	122	9	340	340	NUM
fuelectenerg-7534	122	10	g.	g.	NOUN
fuelectenerg-7534	122	11	tagliapietra	tagliapietra	PROPN
fuelectenerg-7534	122	12	,	,	PUNCT
fuelectenerg-7534	122	13	j.	j.	PROPN
fuelectenerg-7534	122	14	iannacci	iannacci	PROPN
fuelectenerg-7534	122	15	2.3	2.3	NUM
fuelectenerg-7534	122	16	.	.	PUNCT
fuelectenerg-7534	123	1	set	set	VERB
fuelectenerg-7534	123	2	of	of	ADP
fuelectenerg-7534	123	3	reference	reference	NOUN
fuelectenerg-7534	123	4	guidelines	guideline	NOUN
fuelectenerg-7534	123	5	in	in	ADP
fuelectenerg-7534	123	6	design	design	NOUN
fuelectenerg-7534	123	7	and	and	CCONJ
fuelectenerg-7534	123	8	optimization	optimization	NOUN
fuelectenerg-7534	123	9	of	of	ADP
fuelectenerg-7534	123	10	multiphysics	multiphysics	PROPN
fuelectenerg-7534	123	11	design	design	NOUN
fuelectenerg-7534	123	12	of	of	ADP
fuelectenerg-7534	123	13	rf	rf	NOUN
fuelectenerg-7534	123	14	-	-	PUNCT
fuelectenerg-7534	123	15	mems	mem	NOUN
fuelectenerg-7534	123	16	all	all	DET
fuelectenerg-7534	123	17	the	the	DET
fuelectenerg-7534	123	18	previously	previously	ADV
fuelectenerg-7534	123	19	mentioned	mention	VERB
fuelectenerg-7534	123	20	realizations	realization	NOUN
fuelectenerg-7534	123	21	exhibit	exhibit	VERB
fuelectenerg-7534	123	22	respectable	respectable	ADJ
fuelectenerg-7534	123	23	performances	performance	NOUN
fuelectenerg-7534	123	24	,	,	PUNCT
fuelectenerg-7534	123	25	covering	cover	VERB
fuelectenerg-7534	123	26	different	different	ADJ
fuelectenerg-7534	123	27	portions	portion	NOUN
fuelectenerg-7534	123	28	on	on	ADP
fuelectenerg-7534	123	29	the	the	DET
fuelectenerg-7534	123	30	spectrum	spectrum	NOUN
fuelectenerg-7534	123	31	allocated	allocate	VERB
fuelectenerg-7534	123	32	to	to	ADP
fuelectenerg-7534	123	33	the	the	DET
fuelectenerg-7534	123	34	current	current	ADJ
fuelectenerg-7534	123	35	5	5	NUM
fuelectenerg-7534	123	36	g	g	NOUN
fuelectenerg-7534	123	37	paradigm	paradigm	NOUN
fuelectenerg-7534	123	38	.	.	PUNCT
fuelectenerg-7534	124	1	bearing	bear	VERB
fuelectenerg-7534	124	2	in	in	ADP
fuelectenerg-7534	124	3	mind	mind	NOUN
fuelectenerg-7534	124	4	the	the	DET
fuelectenerg-7534	124	5	target	target	NOUN
fuelectenerg-7534	124	6	requirements	requirement	NOUN
fuelectenerg-7534	124	7	,	,	PUNCT
fuelectenerg-7534	124	8	some	some	PRON
fuelectenerg-7534	124	9	of	of	ADP
fuelectenerg-7534	124	10	the	the	DET
fuelectenerg-7534	124	11	mentioned	mention	VERB
fuelectenerg-7534	124	12	solutions	solution	NOUN
fuelectenerg-7534	124	13	are	be	AUX
fuelectenerg-7534	124	14	more	more	ADV
fuelectenerg-7534	124	15	favorable	favorable	ADJ
fuelectenerg-7534	124	16	in	in	ADP
fuelectenerg-7534	124	17	terms	term	NOUN
fuelectenerg-7534	124	18	of	of	ADP
fuelectenerg-7534	124	19	electrical	electrical	ADJ
fuelectenerg-7534	124	20	performances	performance	NOUN
fuelectenerg-7534	124	21	,	,	PUNCT
fuelectenerg-7534	124	22	while	while	SCONJ
fuelectenerg-7534	124	23	others	other	NOUN
fuelectenerg-7534	124	24	may	may	AUX
fuelectenerg-7534	124	25	be	be	AUX
fuelectenerg-7534	124	26	more	more	ADV
fuelectenerg-7534	124	27	convenient	convenient	ADJ
fuelectenerg-7534	124	28	for	for	ADP
fuelectenerg-7534	124	29	their	their	PRON
fuelectenerg-7534	124	30	reliability	reliability	NOUN
fuelectenerg-7534	124	31	,	,	PUNCT
fuelectenerg-7534	124	32	and	and	CCONJ
fuelectenerg-7534	124	33	others	other	NOUN
fuelectenerg-7534	124	34	,	,	PUNCT
fuelectenerg-7534	124	35	again	again	ADV
fuelectenerg-7534	124	36	,	,	PUNCT
fuelectenerg-7534	124	37	for	for	ADP
fuelectenerg-7534	124	38	the	the	DET
fuelectenerg-7534	124	39	possibility	possibility	NOUN
fuelectenerg-7534	124	40	to	to	PART
fuelectenerg-7534	124	41	be	be	AUX
fuelectenerg-7534	124	42	easily	easily	ADV
fuelectenerg-7534	124	43	integrated	integrate	VERB
fuelectenerg-7534	124	44	with	with	ADP
fuelectenerg-7534	124	45	other	other	ADJ
fuelectenerg-7534	124	46	circuits	circuit	NOUN
fuelectenerg-7534	124	47	.	.	PUNCT
fuelectenerg-7534	125	1	further	further	ADJ
fuelectenerg-7534	125	2	solutions	solution	NOUN
fuelectenerg-7534	125	3	,	,	PUNCT
fuelectenerg-7534	125	4	instead	instead	ADV
fuelectenerg-7534	125	5	,	,	PUNCT
fuelectenerg-7534	125	6	score	score	VERB
fuelectenerg-7534	125	7	viable	viable	ADJ
fuelectenerg-7534	125	8	trade	trade	NOUN
fuelectenerg-7534	125	9	-	-	PUNCT
fuelectenerg-7534	125	10	offs	off	NOUN
fuelectenerg-7534	125	11	between	between	ADP
fuelectenerg-7534	125	12	all	all	DET
fuelectenerg-7534	125	13	the	the	DET
fuelectenerg-7534	125	14	mentioned	mention	VERB
fuelectenerg-7534	125	15	characteristics	characteristic	NOUN
fuelectenerg-7534	125	16	.	.	PUNCT
fuelectenerg-7534	126	1	in	in	ADP
fuelectenerg-7534	126	2	any	any	DET
fuelectenerg-7534	126	3	case	case	NOUN
fuelectenerg-7534	126	4	,	,	PUNCT
fuelectenerg-7534	126	5	the	the	DET
fuelectenerg-7534	126	6	existing	exist	VERB
fuelectenerg-7534	126	7	vulnerabilities	vulnerability	NOUN
fuelectenerg-7534	126	8	of	of	ADP
fuelectenerg-7534	126	9	a	a	DET
fuelectenerg-7534	126	10	certain	certain	ADJ
fuelectenerg-7534	126	11	design	design	NOUN
fuelectenerg-7534	126	12	concept	concept	NOUN
fuelectenerg-7534	126	13	can	can	AUX
fuelectenerg-7534	126	14	be	be	AUX
fuelectenerg-7534	126	15	properly	properly	ADV
fuelectenerg-7534	126	16	addressed	address	VERB
fuelectenerg-7534	126	17	,	,	PUNCT
fuelectenerg-7534	126	18	depending	depend	VERB
fuelectenerg-7534	126	19	on	on	ADP
fuelectenerg-7534	126	20	their	their	PRON
fuelectenerg-7534	126	21	nature	nature	NOUN
fuelectenerg-7534	126	22	.	.	PUNCT
fuelectenerg-7534	127	1	to	to	ADP
fuelectenerg-7534	127	2	this	this	DET
fuelectenerg-7534	127	3	end	end	NOUN
fuelectenerg-7534	127	4	,	,	PUNCT
fuelectenerg-7534	127	5	as	as	SCONJ
fuelectenerg-7534	127	6	pointed	point	VERB
fuelectenerg-7534	127	7	out	out	ADP
fuelectenerg-7534	127	8	in	in	ADP
fuelectenerg-7534	127	9	[	[	X
fuelectenerg-7534	127	10	11	11	NUM
fuelectenerg-7534	127	11	]	]	PUNCT
fuelectenerg-7534	127	12	,	,	PUNCT
fuelectenerg-7534	127	13	there	there	PRON
fuelectenerg-7534	127	14	are	be	VERB
fuelectenerg-7534	127	15	different	different	ADJ
fuelectenerg-7534	127	16	guidelines	guideline	NOUN
fuelectenerg-7534	127	17	that	that	PRON
fuelectenerg-7534	127	18	may	may	AUX
fuelectenerg-7534	127	19	help	help	VERB
fuelectenerg-7534	127	20	a	a	DET
fuelectenerg-7534	127	21	designer	designer	NOUN
fuelectenerg-7534	127	22	involved	involve	VERB
fuelectenerg-7534	127	23	in	in	ADP
fuelectenerg-7534	127	24	the	the	DET
fuelectenerg-7534	127	25	optimization	optimization	NOUN
fuelectenerg-7534	127	26	of	of	ADP
fuelectenerg-7534	127	27	a	a	DET
fuelectenerg-7534	127	28	particular	particular	ADJ
fuelectenerg-7534	127	29	device	device	NOUN
fuelectenerg-7534	127	30	.	.	PUNCT
fuelectenerg-7534	128	1	starting	start	VERB
fuelectenerg-7534	128	2	from	from	ADP
fuelectenerg-7534	128	3	the	the	DET
fuelectenerg-7534	128	4	electromechanical	electromechanical	ADJ
fuelectenerg-7534	128	5	behavior	behavior	NOUN
fuelectenerg-7534	128	6	of	of	ADP
fuelectenerg-7534	128	7	rf	rf	NOUN
fuelectenerg-7534	128	8	-	-	PUNCT
fuelectenerg-7534	128	9	mems	mem	NOUN
fuelectenerg-7534	128	10	,	,	PUNCT
fuelectenerg-7534	128	11	a	a	DET
fuelectenerg-7534	128	12	shorter	short	ADJ
fuelectenerg-7534	128	13	switching	switching	NOUN
fuelectenerg-7534	128	14	time	time	NOUN
fuelectenerg-7534	128	15	can	can	AUX
fuelectenerg-7534	128	16	be	be	AUX
fuelectenerg-7534	128	17	achieved	achieve	VERB
fuelectenerg-7534	128	18	by	by	ADP
fuelectenerg-7534	128	19	acting	act	VERB
fuelectenerg-7534	128	20	on	on	ADP
fuelectenerg-7534	128	21	the	the	DET
fuelectenerg-7534	128	22	actuation	actuation	NOUN
fuelectenerg-7534	128	23	principle	principle	NOUN
fuelectenerg-7534	128	24	,	,	PUNCT
fuelectenerg-7534	128	25	as	as	ADV
fuelectenerg-7534	128	26	well	well	ADV
fuelectenerg-7534	128	27	as	as	ADP
fuelectenerg-7534	128	28	on	on	ADP
fuelectenerg-7534	128	29	the	the	DET
fuelectenerg-7534	128	30	structural	structural	ADJ
fuelectenerg-7534	128	31	or	or	CCONJ
fuelectenerg-7534	128	32	electrical	electrical	ADJ
fuelectenerg-7534	128	33	features	feature	NOUN
fuelectenerg-7534	128	34	of	of	ADP
fuelectenerg-7534	128	35	the	the	DET
fuelectenerg-7534	128	36	device	device	NOUN
fuelectenerg-7534	128	37	at	at	ADP
fuelectenerg-7534	128	38	stake	stake	NOUN
fuelectenerg-7534	128	39	.	.	PUNCT
fuelectenerg-7534	129	1	piezoelectric	piezoelectric	NOUN
fuelectenerg-7534	129	2	actuation	actuation	NOUN
fuelectenerg-7534	129	3	generally	generally	ADV
fuelectenerg-7534	129	4	guarantees	guarantee	VERB
fuelectenerg-7534	129	5	a	a	DET
fuelectenerg-7534	129	6	faster	fast	ADJ
fuelectenerg-7534	129	7	actuation	actuation	NOUN
fuelectenerg-7534	129	8	,	,	PUNCT
fuelectenerg-7534	129	9	but	but	CCONJ
fuelectenerg-7534	129	10	it	it	PRON
fuelectenerg-7534	129	11	is	be	AUX
fuelectenerg-7534	129	12	prone	prone	ADJ
fuelectenerg-7534	129	13	to	to	ADP
fuelectenerg-7534	129	14	unwanted	unwanted	ADJ
fuelectenerg-7534	129	15	parasitic	parasitic	ADJ
fuelectenerg-7534	129	16	actuations	actuation	NOUN
fuelectenerg-7534	130	1	[	[	X
fuelectenerg-7534	130	2	25	25	NUM
fuelectenerg-7534	130	3	]	]	X
fuelectenerg-7534	130	4	;	;	PUNCT
fuelectenerg-7534	130	5	in	in	ADP
fuelectenerg-7534	130	6	particular	particular	ADJ
fuelectenerg-7534	130	7	,	,	PUNCT
fuelectenerg-7534	130	8	mismatches	mismatch	NOUN
fuelectenerg-7534	130	9	of	of	ADP
fuelectenerg-7534	130	10	lattice	lattice	NOUN
fuelectenerg-7534	130	11	or	or	CCONJ
fuelectenerg-7534	130	12	thermal	thermal	ADJ
fuelectenerg-7534	130	13	expansion	expansion	NOUN
fuelectenerg-7534	130	14	coefficients	coefficient	NOUN
fuelectenerg-7534	130	15	of	of	ADP
fuelectenerg-7534	130	16	the	the	DET
fuelectenerg-7534	130	17	different	different	ADJ
fuelectenerg-7534	130	18	layers	layer	NOUN
fuelectenerg-7534	130	19	will	will	AUX
fuelectenerg-7534	130	20	determine	determine	VERB
fuelectenerg-7534	130	21	the	the	DET
fuelectenerg-7534	130	22	presence	presence	NOUN
fuelectenerg-7534	130	23	of	of	ADP
fuelectenerg-7534	130	24	residual	residual	ADJ
fuelectenerg-7534	130	25	stress	stress	NOUN
fuelectenerg-7534	130	26	in	in	ADP
fuelectenerg-7534	130	27	the	the	DET
fuelectenerg-7534	130	28	structure	structure	NOUN
fuelectenerg-7534	130	29	,	,	PUNCT
fuelectenerg-7534	130	30	leading	lead	VERB
fuelectenerg-7534	130	31	to	to	ADP
fuelectenerg-7534	130	32	cracks	crack	NOUN
fuelectenerg-7534	130	33	and	and	CCONJ
fuelectenerg-7534	130	34	bends	bend	NOUN
fuelectenerg-7534	130	35	[	[	X
fuelectenerg-7534	130	36	26	26	NUM
fuelectenerg-7534	130	37	]	]	PUNCT
fuelectenerg-7534	130	38	.	.	PUNCT
fuelectenerg-7534	131	1	from	from	ADP
fuelectenerg-7534	131	2	the	the	DET
fuelectenerg-7534	131	3	structural	structural	ADJ
fuelectenerg-7534	131	4	point	point	NOUN
fuelectenerg-7534	131	5	of	of	ADP
fuelectenerg-7534	131	6	view	view	NOUN
fuelectenerg-7534	131	7	,	,	PUNCT
fuelectenerg-7534	131	8	multiple	multiple	ADJ
fuelectenerg-7534	131	9	and	and	CCONJ
fuelectenerg-7534	131	10	large	large	ADJ
fuelectenerg-7534	131	11	holes	hole	NOUN
fuelectenerg-7534	131	12	on	on	ADP
fuelectenerg-7534	131	13	the	the	DET
fuelectenerg-7534	131	14	movable	movable	ADJ
fuelectenerg-7534	131	15	membranes	membrane	NOUN
fuelectenerg-7534	131	16	are	be	AUX
fuelectenerg-7534	131	17	a	a	DET
fuelectenerg-7534	131	18	wise	wise	ADJ
fuelectenerg-7534	131	19	option	option	NOUN
fuelectenerg-7534	131	20	,	,	PUNCT
fuelectenerg-7534	131	21	since	since	SCONJ
fuelectenerg-7534	131	22	they	they	PRON
fuelectenerg-7534	131	23	increase	increase	VERB
fuelectenerg-7534	131	24	the	the	DET
fuelectenerg-7534	131	25	speed	speed	NOUN
fuelectenerg-7534	131	26	of	of	ADP
fuelectenerg-7534	131	27	actuation	actuation	NOUN
fuelectenerg-7534	131	28	by	by	ADP
fuelectenerg-7534	131	29	reducing	reduce	VERB
fuelectenerg-7534	131	30	the	the	DET
fuelectenerg-7534	131	31	damping	damping	NOUN
fuelectenerg-7534	131	32	of	of	ADP
fuelectenerg-7534	131	33	air	air	NOUN
fuelectenerg-7534	131	34	.	.	PUNCT
fuelectenerg-7534	132	1	this	this	PRON
fuelectenerg-7534	132	2	is	be	AUX
fuelectenerg-7534	132	3	one	one	NUM
fuelectenerg-7534	132	4	of	of	ADP
fuelectenerg-7534	132	5	the	the	DET
fuelectenerg-7534	132	6	criteria	criterion	NOUN
fuelectenerg-7534	132	7	behind	behind	ADP
fuelectenerg-7534	132	8	the	the	DET
fuelectenerg-7534	132	9	design	design	NOUN
fuelectenerg-7534	132	10	of	of	ADP
fuelectenerg-7534	132	11	the	the	DET
fuelectenerg-7534	132	12	membrane	membrane	NOUN
fuelectenerg-7534	132	13	reported	report	VERB
fuelectenerg-7534	132	14	in	in	ADP
fuelectenerg-7534	132	15	[	[	X
fuelectenerg-7534	132	16	22	22	NUM
fuelectenerg-7534	132	17	]	]	PUNCT
fuelectenerg-7534	132	18	.	.	PUNCT
fuelectenerg-7534	133	1	another	another	DET
fuelectenerg-7534	133	2	option	option	NOUN
fuelectenerg-7534	133	3	consists	consist	VERB
fuelectenerg-7534	133	4	in	in	ADP
fuelectenerg-7534	133	5	modulating	modulate	VERB
fuelectenerg-7534	133	6	the	the	DET
fuelectenerg-7534	133	7	amplitude	amplitude	NOUN
fuelectenerg-7534	133	8	of	of	ADP
fuelectenerg-7534	133	9	the	the	DET
fuelectenerg-7534	133	10	biasing	biasing	ADJ
fuelectenerg-7534	133	11	waveform	waveform	NOUN
fuelectenerg-7534	133	12	,	,	PUNCT
fuelectenerg-7534	133	13	as	as	SCONJ
fuelectenerg-7534	133	14	discussed	discuss	VERB
fuelectenerg-7534	133	15	in	in	ADP
fuelectenerg-7534	133	16	[	[	X
fuelectenerg-7534	133	17	27	27	NUM
fuelectenerg-7534	133	18	]	]	PUNCT
fuelectenerg-7534	133	19	.	.	PUNCT
fuelectenerg-7534	134	1	while	while	SCONJ
fuelectenerg-7534	134	2	a	a	DET
fuelectenerg-7534	134	3	smaller	small	ADJ
fuelectenerg-7534	134	4	voltage	voltage	NOUN
fuelectenerg-7534	134	5	(	(	PUNCT
fuelectenerg-7534	134	6	as	as	SCONJ
fuelectenerg-7534	134	7	compared	compare	VERB
fuelectenerg-7534	134	8	to	to	ADP
fuelectenerg-7534	134	9	pull	pull	VERB
fuelectenerg-7534	134	10	-	-	PUNCT
fuelectenerg-7534	134	11	in	in	ADP
fuelectenerg-7534	134	12	voltage	voltage	NOUN
fuelectenerg-7534	134	13	)	)	PUNCT
fuelectenerg-7534	134	14	can	can	AUX
fuelectenerg-7534	134	15	be	be	AUX
fuelectenerg-7534	134	16	adopted	adopt	VERB
fuelectenerg-7534	134	17	to	to	PART
fuelectenerg-7534	134	18	maintain	maintain	VERB
fuelectenerg-7534	134	19	the	the	DET
fuelectenerg-7534	134	20	membrane	membrane	NOUN
fuelectenerg-7534	134	21	actuated	actuate	VERB
fuelectenerg-7534	134	22	,	,	PUNCT
fuelectenerg-7534	134	23	a	a	DET
fuelectenerg-7534	134	24	short	short	ADJ
fuelectenerg-7534	134	25	and	and	CCONJ
fuelectenerg-7534	134	26	relatively	relatively	ADV
fuelectenerg-7534	134	27	high	high	ADJ
fuelectenerg-7534	134	28	voltage	voltage	NOUN
fuelectenerg-7534	134	29	peak	peak	NOUN
fuelectenerg-7534	134	30	of	of	ADP
fuelectenerg-7534	134	31	voltage	voltage	NOUN
fuelectenerg-7534	134	32	can	can	AUX
fuelectenerg-7534	134	33	accelerate	accelerate	VERB
fuelectenerg-7534	134	34	the	the	DET
fuelectenerg-7534	134	35	movement	movement	NOUN
fuelectenerg-7534	134	36	of	of	ADP
fuelectenerg-7534	134	37	the	the	DET
fuelectenerg-7534	134	38	membrane	membrane	NOUN
fuelectenerg-7534	134	39	.	.	PUNCT
fuelectenerg-7534	135	1	an	an	DET
fuelectenerg-7534	135	2	easier	easy	ADJ
fuelectenerg-7534	135	3	integration	integration	NOUN
fuelectenerg-7534	135	4	on	on	ADP
fuelectenerg-7534	135	5	common	common	ADJ
fuelectenerg-7534	135	6	wireless	wireless	ADJ
fuelectenerg-7534	135	7	or	or	CCONJ
fuelectenerg-7534	135	8	mobile	mobile	ADJ
fuelectenerg-7534	135	9	devices	device	NOUN
fuelectenerg-7534	135	10	usually	usually	ADV
fuelectenerg-7534	135	11	requires	require	VERB
fuelectenerg-7534	135	12	low	low	ADJ
fuelectenerg-7534	135	13	actuation	actuation	NOUN
fuelectenerg-7534	135	14	voltages	voltage	NOUN
fuelectenerg-7534	135	15	,	,	PUNCT
fuelectenerg-7534	135	16	compatible	compatible	ADJ
fuelectenerg-7534	135	17	with	with	ADP
fuelectenerg-7534	135	18	typical	typical	ADJ
fuelectenerg-7534	135	19	supply	supply	NOUN
fuelectenerg-7534	135	20	voltages	voltage	NOUN
fuelectenerg-7534	135	21	of	of	ADP
fuelectenerg-7534	135	22	cmos	cmos	PROPN
fuelectenerg-7534	135	23	technology	technology	NOUN
fuelectenerg-7534	135	24	(	(	PUNCT
fuelectenerg-7534	135	25	roughly	roughly	ADV
fuelectenerg-7534	135	26	from	from	ADP
fuelectenerg-7534	135	27	1.5	1.5	NUM
fuelectenerg-7534	135	28	to	to	PART
fuelectenerg-7534	135	29	6	6	NUM
fuelectenerg-7534	135	30	v	v	NOUN
fuelectenerg-7534	135	31	)	)	PUNCT
fuelectenerg-7534	135	32	.	.	PUNCT
fuelectenerg-7534	136	1	such	such	ADJ
fuelectenerg-7534	136	2	low	low	ADJ
fuelectenerg-7534	136	3	voltages	voltage	NOUN
fuelectenerg-7534	136	4	avoid	avoid	VERB
fuelectenerg-7534	136	5	the	the	DET
fuelectenerg-7534	136	6	presence	presence	NOUN
fuelectenerg-7534	136	7	of	of	ADP
fuelectenerg-7534	136	8	converters	converter	NOUN
fuelectenerg-7534	136	9	,	,	PUNCT
fuelectenerg-7534	136	10	saving	save	VERB
fuelectenerg-7534	136	11	costs	cost	NOUN
fuelectenerg-7534	136	12	and	and	CCONJ
fuelectenerg-7534	136	13	space	space	NOUN
fuelectenerg-7534	136	14	on	on	ADP
fuelectenerg-7534	136	15	chips	chip	NOUN
fuelectenerg-7534	136	16	.	.	PUNCT
fuelectenerg-7534	137	1	another	another	DET
fuelectenerg-7534	137	2	beneficial	beneficial	ADJ
fuelectenerg-7534	137	3	effect	effect	NOUN
fuelectenerg-7534	137	4	is	be	AUX
fuelectenerg-7534	137	5	an	an	DET
fuelectenerg-7534	137	6	enhanced	enhanced	ADJ
fuelectenerg-7534	137	7	reliability	reliability	NOUN
fuelectenerg-7534	137	8	,	,	PUNCT
fuelectenerg-7534	137	9	provided	provide	VERB
fuelectenerg-7534	137	10	by	by	ADP
fuelectenerg-7534	137	11	the	the	DET
fuelectenerg-7534	137	12	reduction	reduction	NOUN
fuelectenerg-7534	137	13	of	of	ADP
fuelectenerg-7534	137	14	mechanical	mechanical	ADJ
fuelectenerg-7534	137	15	shock	shock	NOUN
fuelectenerg-7534	137	16	on	on	ADP
fuelectenerg-7534	137	17	the	the	DET
fuelectenerg-7534	137	18	movable	movable	ADJ
fuelectenerg-7534	137	19	membrane	membrane	NOUN
fuelectenerg-7534	137	20	.	.	PUNCT
fuelectenerg-7534	138	1	within	within	ADP
fuelectenerg-7534	138	2	the	the	DET
fuelectenerg-7534	138	3	framework	framework	NOUN
fuelectenerg-7534	138	4	of	of	ADP
fuelectenerg-7534	138	5	electrostatic	electrostatic	ADJ
fuelectenerg-7534	138	6	actuation	actuation	NOUN
fuelectenerg-7534	138	7	,	,	PUNCT
fuelectenerg-7534	138	8	there	there	PRON
fuelectenerg-7534	138	9	are	be	VERB
fuelectenerg-7534	138	10	three	three	NUM
fuelectenerg-7534	138	11	main	main	ADJ
fuelectenerg-7534	138	12	structural	structural	ADJ
fuelectenerg-7534	138	13	strategies	strategy	NOUN
fuelectenerg-7534	138	14	to	to	PART
fuelectenerg-7534	138	15	achieve	achieve	VERB
fuelectenerg-7534	138	16	such	such	ADJ
fuelectenerg-7534	138	17	low	low	ADJ
fuelectenerg-7534	138	18	voltages	voltage	NOUN
fuelectenerg-7534	138	19	:	:	PUNCT
fuelectenerg-7534	138	20	decreasing	decrease	VERB
fuelectenerg-7534	138	21	the	the	DET
fuelectenerg-7534	138	22	spring	spring	NOUN
fuelectenerg-7534	138	23	constant	constant	ADJ
fuelectenerg-7534	138	24	,	,	PUNCT
fuelectenerg-7534	138	25	maximizing	maximize	VERB
fuelectenerg-7534	138	26	the	the	DET
fuelectenerg-7534	138	27	actuation	actuation	NOUN
fuelectenerg-7534	138	28	area	area	NOUN
fuelectenerg-7534	138	29	,	,	PUNCT
fuelectenerg-7534	138	30	and	and	CCONJ
fuelectenerg-7534	138	31	decreasing	decrease	VERB
fuelectenerg-7534	138	32	the	the	DET
fuelectenerg-7534	138	33	air	air	NOUN
fuelectenerg-7534	138	34	gap	gap	NOUN
fuelectenerg-7534	138	35	.	.	PUNCT
fuelectenerg-7534	139	1	the	the	DET
fuelectenerg-7534	139	2	spring	spring	NOUN
fuelectenerg-7534	139	3	constant	constant	ADJ
fuelectenerg-7534	139	4	of	of	ADP
fuelectenerg-7534	139	5	the	the	DET
fuelectenerg-7534	139	6	movable	movable	ADJ
fuelectenerg-7534	139	7	structure	structure	NOUN
fuelectenerg-7534	139	8	can	can	AUX
fuelectenerg-7534	139	9	be	be	AUX
fuelectenerg-7534	139	10	lowered	lower	VERB
fuelectenerg-7534	139	11	by	by	ADP
fuelectenerg-7534	139	12	adopting	adopt	VERB
fuelectenerg-7534	139	13	folded	fold	VERB
fuelectenerg-7534	139	14	or	or	CCONJ
fuelectenerg-7534	139	15	meandered	meandered	ADJ
fuelectenerg-7534	139	16	beams	beam	NOUN
fuelectenerg-7534	139	17	with	with	ADP
fuelectenerg-7534	139	18	reduced	reduced	ADJ
fuelectenerg-7534	139	19	thickness	thickness	NOUN
fuelectenerg-7534	139	20	,	,	PUNCT
fuelectenerg-7534	139	21	as	as	ADP
fuelectenerg-7534	139	22	in	in	ADP
fuelectenerg-7534	139	23	[	[	X
fuelectenerg-7534	139	24	20][22	20][22	NOUN
fuelectenerg-7534	139	25	]	]	X
fuelectenerg-7534	139	26	.	.	PUNCT
fuelectenerg-7534	140	1	the	the	DET
fuelectenerg-7534	140	2	negative	negative	ADJ
fuelectenerg-7534	140	3	consequence	consequence	NOUN
fuelectenerg-7534	140	4	of	of	ADP
fuelectenerg-7534	140	5	a	a	DET
fuelectenerg-7534	140	6	reduced	reduce	VERB
fuelectenerg-7534	140	7	spring	spring	NOUN
fuelectenerg-7534	140	8	constant	constant	ADJ
fuelectenerg-7534	140	9	of	of	ADP
fuelectenerg-7534	140	10	a	a	DET
fuelectenerg-7534	140	11	structure	structure	NOUN
fuelectenerg-7534	140	12	is	be	AUX
fuelectenerg-7534	140	13	an	an	DET
fuelectenerg-7534	140	14	attenuation	attenuation	NOUN
fuelectenerg-7534	140	15	of	of	ADP
fuelectenerg-7534	140	16	its	its	PRON
fuelectenerg-7534	140	17	restoring	restore	VERB
fuelectenerg-7534	140	18	force	force	NOUN
fuelectenerg-7534	140	19	,	,	PUNCT
fuelectenerg-7534	140	20	which	which	PRON
fuelectenerg-7534	140	21	,	,	PUNCT
fuelectenerg-7534	140	22	in	in	ADP
fuelectenerg-7534	140	23	turn	turn	NOUN
fuelectenerg-7534	140	24	,	,	PUNCT
fuelectenerg-7534	140	25	determines	determine	VERB
fuelectenerg-7534	140	26	an	an	DET
fuelectenerg-7534	140	27	increased	increased	ADJ
fuelectenerg-7534	140	28	risk	risk	NOUN
fuelectenerg-7534	140	29	of	of	ADP
fuelectenerg-7534	140	30	stiction	stiction	NOUN
fuelectenerg-7534	140	31	(	(	PUNCT
fuelectenerg-7534	140	32	missed	miss	VERB
fuelectenerg-7534	140	33	release	release	NOUN
fuelectenerg-7534	140	34	of	of	ADP
fuelectenerg-7534	140	35	the	the	DET
fuelectenerg-7534	140	36	actuated	actuate	VERB
fuelectenerg-7534	140	37	membrane	membrane	NOUN
fuelectenerg-7534	140	38	after	after	ADP
fuelectenerg-7534	140	39	the	the	DET
fuelectenerg-7534	140	40	zeroing	zeroing	NOUN
fuelectenerg-7534	140	41	of	of	ADP
fuelectenerg-7534	140	42	the	the	DET
fuelectenerg-7534	140	43	actuation	actuation	NOUN
fuelectenerg-7534	140	44	voltage	voltage	NOUN
fuelectenerg-7534	140	45	)	)	PUNCT
fuelectenerg-7534	140	46	.	.	PUNCT
fuelectenerg-7534	141	1	this	this	DET
fuelectenerg-7534	141	2	issue	issue	NOUN
fuelectenerg-7534	141	3	can	can	AUX
fuelectenerg-7534	141	4	be	be	AUX
fuelectenerg-7534	141	5	counteracted	counteract	VERB
fuelectenerg-7534	141	6	by	by	ADP
fuelectenerg-7534	141	7	inserting	insert	VERB
fuelectenerg-7534	141	8	additional	additional	ADJ
fuelectenerg-7534	141	9	electrodes	electrode	NOUN
fuelectenerg-7534	141	10	,	,	PUNCT
fuelectenerg-7534	141	11	which	which	PRON
fuelectenerg-7534	141	12	could	could	AUX
fuelectenerg-7534	141	13	help	help	VERB
fuelectenerg-7534	141	14	the	the	DET
fuelectenerg-7534	141	15	proper	proper	ADJ
fuelectenerg-7534	141	16	release	release	NOUN
fuelectenerg-7534	141	17	of	of	ADP
fuelectenerg-7534	141	18	the	the	DET
fuelectenerg-7534	141	19	membrane	membrane	NOUN
fuelectenerg-7534	141	20	;	;	PUNCT
fuelectenerg-7534	141	21	but	but	CCONJ
fuelectenerg-7534	141	22	sometimes	sometimes	ADV
fuelectenerg-7534	141	23	this	this	DET
fuelectenerg-7534	141	24	solution	solution	NOUN
fuelectenerg-7534	141	25	is	be	AUX
fuelectenerg-7534	141	26	not	not	PART
fuelectenerg-7534	141	27	affordable	affordable	ADJ
fuelectenerg-7534	141	28	:	:	PUNCT
fuelectenerg-7534	141	29	beside	beside	ADP
fuelectenerg-7534	141	30	the	the	DET
fuelectenerg-7534	141	31	significant	significant	ADJ
fuelectenerg-7534	141	32	cost	cost	NOUN
fuelectenerg-7534	141	33	in	in	ADP
fuelectenerg-7534	141	34	terms	term	NOUN
fuelectenerg-7534	141	35	of	of	ADP
fuelectenerg-7534	141	36	complexity	complexity	NOUN
fuelectenerg-7534	141	37	of	of	ADP
fuelectenerg-7534	141	38	the	the	DET
fuelectenerg-7534	141	39	design	design	NOUN
fuelectenerg-7534	141	40	,	,	PUNCT
fuelectenerg-7534	141	41	in	in	ADP
fuelectenerg-7534	141	42	some	some	DET
fuelectenerg-7534	141	43	cases	case	NOUN
fuelectenerg-7534	141	44	,	,	PUNCT
fuelectenerg-7534	141	45	the	the	DET
fuelectenerg-7534	141	46	housing	housing	NOUN
fuelectenerg-7534	141	47	of	of	ADP
fuelectenerg-7534	141	48	electrodes	electrode	NOUN
fuelectenerg-7534	141	49	above	above	ADP
fuelectenerg-7534	141	50	the	the	DET
fuelectenerg-7534	141	51	membrane	membrane	NOUN
fuelectenerg-7534	141	52	may	may	AUX
fuelectenerg-7534	141	53	excessively	excessively	ADV
fuelectenerg-7534	141	54	complicate	complicate	VERB
fuelectenerg-7534	141	55	the	the	DET
fuelectenerg-7534	141	56	fabrication	fabrication	NOUN
fuelectenerg-7534	141	57	process	process	NOUN
fuelectenerg-7534	141	58	.	.	PUNCT
fuelectenerg-7534	142	1	in	in	ADP
fuelectenerg-7534	142	2	those	those	DET
fuelectenerg-7534	142	3	cases	case	NOUN
fuelectenerg-7534	142	4	,	,	PUNCT
fuelectenerg-7534	142	5	a	a	DET
fuelectenerg-7534	142	6	viable	viable	ADJ
fuelectenerg-7534	142	7	option	option	NOUN
fuelectenerg-7534	142	8	is	be	AUX
fuelectenerg-7534	142	9	represented	represent	VERB
fuelectenerg-7534	142	10	by	by	ADP
fuelectenerg-7534	142	11	a	a	DET
fuelectenerg-7534	142	12	proper	proper	ADJ
fuelectenerg-7534	142	13	exploitation	exploitation	NOUN
fuelectenerg-7534	142	14	of	of	ADP
fuelectenerg-7534	142	15	packaging	packaging	NOUN
fuelectenerg-7534	142	16	,	,	PUNCT
fuelectenerg-7534	142	17	as	as	SCONJ
fuelectenerg-7534	142	18	discussed	discuss	VERB
fuelectenerg-7534	142	19	in	in	ADP
fuelectenerg-7534	142	20	section	section	NOUN
fuelectenerg-7534	142	21	3	3	NUM
fuelectenerg-7534	142	22	.	.	PUNCT
fuelectenerg-7534	142	23	maximizing	maximize	VERB
fuelectenerg-7534	142	24	the	the	DET
fuelectenerg-7534	142	25	actuation	actuation	NOUN
fuelectenerg-7534	142	26	area	area	NOUN
fuelectenerg-7534	142	27	consists	consist	VERB
fuelectenerg-7534	142	28	in	in	ADP
fuelectenerg-7534	142	29	maximizing	maximize	VERB
fuelectenerg-7534	142	30	the	the	DET
fuelectenerg-7534	142	31	overlapping	overlap	VERB
fuelectenerg-7534	142	32	area	area	NOUN
fuelectenerg-7534	142	33	between	between	ADP
fuelectenerg-7534	142	34	the	the	DET
fuelectenerg-7534	142	35	movable	movable	ADJ
fuelectenerg-7534	142	36	structure	structure	NOUN
fuelectenerg-7534	142	37	and	and	CCONJ
fuelectenerg-7534	142	38	the	the	DET
fuelectenerg-7534	142	39	fixed	fix	VERB
fuelectenerg-7534	142	40	electrodes	electrode	NOUN
fuelectenerg-7534	142	41	;	;	PUNCT
fuelectenerg-7534	142	42	for	for	ADP
fuelectenerg-7534	142	43	this	this	DET
fuelectenerg-7534	142	44	purpose	purpose	NOUN
fuelectenerg-7534	142	45	,	,	PUNCT
fuelectenerg-7534	142	46	designers	designer	NOUN
fuelectenerg-7534	142	47	would	would	AUX
fuelectenerg-7534	142	48	prefer	prefer	VERB
fuelectenerg-7534	142	49	membranes	membrane	NOUN
fuelectenerg-7534	142	50	with	with	ADP
fuelectenerg-7534	142	51	relatively	relatively	ADV
fuelectenerg-7534	142	52	large	large	ADJ
fuelectenerg-7534	142	53	areas	area	NOUN
fuelectenerg-7534	142	54	devoted	devote	VERB
fuelectenerg-7534	142	55	to	to	ADP
fuelectenerg-7534	142	56	actuation	actuation	NOUN
fuelectenerg-7534	142	57	,	,	PUNCT
fuelectenerg-7534	142	58	and	and	CCONJ
fuelectenerg-7534	142	59	large	large	ADJ
fuelectenerg-7534	142	60	electrodes	electrode	NOUN
fuelectenerg-7534	142	61	,	,	PUNCT
fuelectenerg-7534	142	62	as	as	ADP
fuelectenerg-7534	142	63	in	in	ADP
fuelectenerg-7534	142	64	[	[	X
fuelectenerg-7534	142	65	21	21	NUM
fuelectenerg-7534	142	66	]	]	PUNCT
fuelectenerg-7534	142	67	.	.	PUNCT
fuelectenerg-7534	143	1	the	the	DET
fuelectenerg-7534	143	2	decrease	decrease	NOUN
fuelectenerg-7534	143	3	of	of	ADP
fuelectenerg-7534	143	4	the	the	DET
fuelectenerg-7534	143	5	air	air	NOUN
fuelectenerg-7534	143	6	gap	gap	NOUN
fuelectenerg-7534	143	7	is	be	AUX
fuelectenerg-7534	143	8	a	a	DET
fuelectenerg-7534	143	9	viable	viable	ADJ
fuelectenerg-7534	143	10	option	option	NOUN
fuelectenerg-7534	143	11	,	,	PUNCT
fuelectenerg-7534	143	12	but	but	CCONJ
fuelectenerg-7534	143	13	it	it	PRON
fuelectenerg-7534	143	14	should	should	AUX
fuelectenerg-7534	143	15	be	be	AUX
fuelectenerg-7534	143	16	carefully	carefully	ADV
fuelectenerg-7534	143	17	managed	manage	VERB
fuelectenerg-7534	143	18	in	in	ADP
fuelectenerg-7534	143	19	case	case	NOUN
fuelectenerg-7534	143	20	of	of	ADP
fuelectenerg-7534	143	21	capacitive	capacitive	ADJ
fuelectenerg-7534	143	22	switches	switch	NOUN
fuelectenerg-7534	143	23	.	.	PUNCT
fuelectenerg-7534	144	1	in	in	ADP
fuelectenerg-7534	144	2	that	that	DET
fuelectenerg-7534	144	3	case	case	NOUN
fuelectenerg-7534	144	4	,	,	PUNCT
fuelectenerg-7534	144	5	a	a	DET
fuelectenerg-7534	144	6	small	small	ADJ
fuelectenerg-7534	144	7	gap	gap	NOUN
fuelectenerg-7534	144	8	between	between	ADP
fuelectenerg-7534	144	9	the	the	DET
fuelectenerg-7534	144	10	non	non	ADJ
fuelectenerg-7534	144	11	-	-	ADJ
fuelectenerg-7534	144	12	actuated	actuated	ADJ
fuelectenerg-7534	144	13	membrane	membrane	NOUN
fuelectenerg-7534	144	14	and	and	CCONJ
fuelectenerg-7534	144	15	the	the	DET
fuelectenerg-7534	144	16	underlying	underlying	ADJ
fuelectenerg-7534	144	17	contact	contact	NOUN
fuelectenerg-7534	144	18	layer	layer	NOUN
fuelectenerg-7534	144	19	would	would	AUX
fuelectenerg-7534	144	20	significantly	significantly	ADV
fuelectenerg-7534	144	21	increase	increase	VERB
fuelectenerg-7534	144	22	the	the	DET
fuelectenerg-7534	144	23	off	off	ADP
fuelectenerg-7534	144	24	-	-	PUNCT
fuelectenerg-7534	144	25	state	state	NOUN
fuelectenerg-7534	144	26	capacitance	capacitance	NOUN
fuelectenerg-7534	144	27	.	.	PUNCT
fuelectenerg-7534	145	1	however	however	ADV
fuelectenerg-7534	145	2	,	,	PUNCT
fuelectenerg-7534	145	3	the	the	DET
fuelectenerg-7534	145	4	corresponding	corresponding	ADJ
fuelectenerg-7534	145	5	limitation	limitation	NOUN
fuelectenerg-7534	145	6	in	in	ADP
fuelectenerg-7534	145	7	the	the	DET
fuelectenerg-7534	145	8	achievable	achievable	ADJ
fuelectenerg-7534	145	9	isolation	isolation	NOUN
fuelectenerg-7534	145	10	can	can	AUX
fuelectenerg-7534	145	11	be	be	AUX
fuelectenerg-7534	145	12	compensated	compensate	VERB
fuelectenerg-7534	145	13	by	by	ADP
fuelectenerg-7534	145	14	matching	match	VERB
fuelectenerg-7534	145	15	circuits	circuit	NOUN
fuelectenerg-7534	145	16	that	that	PRON
fuelectenerg-7534	145	17	mitigate	mitigate	VERB
fuelectenerg-7534	145	18	the	the	DET
fuelectenerg-7534	145	19	parasitic	parasitic	ADJ
fuelectenerg-7534	145	20	capacitance	capacitance	NOUN
fuelectenerg-7534	145	21	[	[	X
fuelectenerg-7534	145	22	28][29	28][29	X
fuelectenerg-7534	145	23	]	]	X
fuelectenerg-7534	145	24	.	.	PUNCT
fuelectenerg-7534	146	1	a	a	DET
fuelectenerg-7534	146	2	comprehensive	comprehensive	ADJ
fuelectenerg-7534	146	3	overview	overview	NOUN
fuelectenerg-7534	146	4	of	of	ADP
fuelectenerg-7534	146	5	recent	recent	ADJ
fuelectenerg-7534	146	6	developments	development	NOUN
fuelectenerg-7534	146	7	in	in	ADP
fuelectenerg-7534	146	8	rf	rf	ADJ
fuelectenerg-7534	146	9	-	-	PUNCT
fuelectenerg-7534	146	10	mems	mems	ADJ
fuelectenerg-7534	146	11	technology	technology	NOUN
fuelectenerg-7534	146	12	341	341	NUM
fuelectenerg-7534	146	13	better	well	ADJ
fuelectenerg-7534	146	14	electrical	electrical	ADJ
fuelectenerg-7534	146	15	performances	performance	NOUN
fuelectenerg-7534	146	16	of	of	ADP
fuelectenerg-7534	146	17	switching	switch	VERB
fuelectenerg-7534	146	18	devices	device	NOUN
fuelectenerg-7534	146	19	can	can	AUX
fuelectenerg-7534	146	20	be	be	AUX
fuelectenerg-7534	146	21	obtained	obtain	VERB
fuelectenerg-7534	146	22	by	by	ADP
fuelectenerg-7534	146	23	a	a	DET
fuelectenerg-7534	146	24	wise	wise	ADJ
fuelectenerg-7534	146	25	selection	selection	NOUN
fuelectenerg-7534	146	26	of	of	ADP
fuelectenerg-7534	146	27	the	the	DET
fuelectenerg-7534	146	28	structure	structure	NOUN
fuelectenerg-7534	146	29	and	and	CCONJ
fuelectenerg-7534	146	30	materials	material	NOUN
fuelectenerg-7534	146	31	,	,	PUNCT
fuelectenerg-7534	146	32	or	or	CCONJ
fuelectenerg-7534	146	33	by	by	ADP
fuelectenerg-7534	146	34	introducing	introduce	VERB
fuelectenerg-7534	146	35	additional	additional	ADJ
fuelectenerg-7534	146	36	electrical	electrical	ADJ
fuelectenerg-7534	146	37	components	component	NOUN
fuelectenerg-7534	146	38	.	.	PUNCT
fuelectenerg-7534	147	1	in	in	ADP
fuelectenerg-7534	147	2	particular	particular	ADJ
fuelectenerg-7534	147	3	,	,	PUNCT
fuelectenerg-7534	147	4	structural	structural	ADJ
fuelectenerg-7534	147	5	modifications	modification	NOUN
fuelectenerg-7534	147	6	may	may	AUX
fuelectenerg-7534	147	7	involve	involve	VERB
fuelectenerg-7534	147	8	the	the	DET
fuelectenerg-7534	147	9	deployment	deployment	NOUN
fuelectenerg-7534	147	10	of	of	ADP
fuelectenerg-7534	147	11	additional	additional	ADJ
fuelectenerg-7534	147	12	shunt	shunt	NOUN
fuelectenerg-7534	147	13	membranes	membrane	NOUN
fuelectenerg-7534	147	14	on	on	ADP
fuelectenerg-7534	147	15	a	a	DET
fuelectenerg-7534	147	16	common	common	ADJ
fuelectenerg-7534	147	17	series	series	NOUN
fuelectenerg-7534	147	18	ohmic	ohmic	PROPN
fuelectenerg-7534	147	19	spst	spst	PROPN
fuelectenerg-7534	147	20	switch	switch	NOUN
fuelectenerg-7534	147	21	.	.	PUNCT
fuelectenerg-7534	148	1	this	this	DET
fuelectenerg-7534	148	2	choice	choice	NOUN
fuelectenerg-7534	148	3	is	be	AUX
fuelectenerg-7534	148	4	the	the	DET
fuelectenerg-7534	148	5	one	one	NOUN
fuelectenerg-7534	148	6	adopted	adopt	VERB
fuelectenerg-7534	148	7	in	in	ADP
fuelectenerg-7534	148	8	[	[	X
fuelectenerg-7534	148	9	15	15	NUM
fuelectenerg-7534	148	10	]	]	PUNCT
fuelectenerg-7534	148	11	,	,	PUNCT
fuelectenerg-7534	148	12	demonstrating	demonstrate	VERB
fuelectenerg-7534	148	13	beneficial	beneficial	ADJ
fuelectenerg-7534	148	14	effects	effect	NOUN
fuelectenerg-7534	148	15	on	on	ADP
fuelectenerg-7534	148	16	isolation	isolation	NOUN
fuelectenerg-7534	148	17	.	.	PUNCT
fuelectenerg-7534	149	1	another	another	DET
fuelectenerg-7534	149	2	strategy	strategy	NOUN
fuelectenerg-7534	149	3	regarding	regard	VERB
fuelectenerg-7534	149	4	series	series	NOUN
fuelectenerg-7534	149	5	ohmic	ohmic	ADJ
fuelectenerg-7534	149	6	switches	switch	NOUN
fuelectenerg-7534	149	7	is	be	AUX
fuelectenerg-7534	149	8	reported	report	VERB
fuelectenerg-7534	149	9	in	in	ADP
fuelectenerg-7534	149	10	[	[	X
fuelectenerg-7534	149	11	30	30	NUM
fuelectenerg-7534	149	12	]	]	PUNCT
fuelectenerg-7534	149	13	,	,	PUNCT
fuelectenerg-7534	149	14	in	in	ADP
fuelectenerg-7534	149	15	which	which	PRON
fuelectenerg-7534	149	16	a	a	DET
fuelectenerg-7534	149	17	triangular	triangular	NOUN
fuelectenerg-7534	149	18	cantilever	cantilever	NOUN
fuelectenerg-7534	149	19	membrane	membrane	NOUN
fuelectenerg-7534	149	20	acts	act	NOUN
fuelectenerg-7534	149	21	as	as	ADP
fuelectenerg-7534	149	22	a	a	DET
fuelectenerg-7534	149	23	tapered	tapered	ADJ
fuelectenerg-7534	149	24	section	section	NOUN
fuelectenerg-7534	149	25	of	of	ADP
fuelectenerg-7534	149	26	the	the	DET
fuelectenerg-7534	149	27	transmission	transmission	NOUN
fuelectenerg-7534	149	28	line	line	NOUN
fuelectenerg-7534	149	29	,	,	PUNCT
fuelectenerg-7534	149	30	reducing	reduce	VERB
fuelectenerg-7534	149	31	the	the	DET
fuelectenerg-7534	149	32	return	return	NOUN
fuelectenerg-7534	149	33	loss	loss	NOUN
fuelectenerg-7534	149	34	of	of	ADP
fuelectenerg-7534	149	35	the	the	DET
fuelectenerg-7534	149	36	device	device	NOUN
fuelectenerg-7534	149	37	.	.	PUNCT
fuelectenerg-7534	150	1	in	in	ADP
fuelectenerg-7534	150	2	case	case	NOUN
fuelectenerg-7534	150	3	of	of	ADP
fuelectenerg-7534	150	4	capacitive	capacitive	ADJ
fuelectenerg-7534	150	5	switches	switch	NOUN
fuelectenerg-7534	150	6	,	,	PUNCT
fuelectenerg-7534	150	7	the	the	DET
fuelectenerg-7534	150	8	achievable	achievable	ADJ
fuelectenerg-7534	150	9	isolation	isolation	NOUN
fuelectenerg-7534	150	10	in	in	ADP
fuelectenerg-7534	150	11	mainly	mainly	ADV
fuelectenerg-7534	150	12	limited	limit	VERB
fuelectenerg-7534	150	13	by	by	ADP
fuelectenerg-7534	150	14	the	the	DET
fuelectenerg-7534	150	15	up	up	ADJ
fuelectenerg-7534	150	16	-	-	PUNCT
fuelectenerg-7534	150	17	state	state	NOUN
fuelectenerg-7534	150	18	capacitance	capacitance	NOUN
fuelectenerg-7534	150	19	,	,	PUNCT
fuelectenerg-7534	150	20	while	while	SCONJ
fuelectenerg-7534	150	21	insertion	insertion	NOUN
fuelectenerg-7534	150	22	loss	loss	NOUN
fuelectenerg-7534	150	23	is	be	AUX
fuelectenerg-7534	150	24	bounded	bound	VERB
fuelectenerg-7534	150	25	by	by	ADP
fuelectenerg-7534	150	26	down	down	ADJ
fuelectenerg-7534	150	27	-	-	PUNCT
fuelectenerg-7534	150	28	state	state	NOUN
fuelectenerg-7534	150	29	capacitance	capacitance	NOUN
fuelectenerg-7534	150	30	[	[	X
fuelectenerg-7534	150	31	31	31	NUM
fuelectenerg-7534	150	32	]	]	PUNCT
fuelectenerg-7534	150	33	.	.	PUNCT
fuelectenerg-7534	151	1	for	for	ADP
fuelectenerg-7534	151	2	this	this	DET
fuelectenerg-7534	151	3	reason	reason	NOUN
fuelectenerg-7534	151	4	,	,	PUNCT
fuelectenerg-7534	151	5	a	a	DET
fuelectenerg-7534	151	6	common	common	ADJ
fuelectenerg-7534	151	7	practice	practice	NOUN
fuelectenerg-7534	151	8	is	be	AUX
fuelectenerg-7534	151	9	to	to	PART
fuelectenerg-7534	151	10	maximize	maximize	VERB
fuelectenerg-7534	151	11	the	the	DET
fuelectenerg-7534	151	12	capacitance	capacitance	NOUN
fuelectenerg-7534	151	13	ratio	ratio	NOUN
fuelectenerg-7534	151	14	.	.	PUNCT
fuelectenerg-7534	152	1	the	the	DET
fuelectenerg-7534	152	2	ratio	ratio	NOUN
fuelectenerg-7534	152	3	can	can	AUX
fuelectenerg-7534	152	4	be	be	AUX
fuelectenerg-7534	152	5	maximized	maximize	VERB
fuelectenerg-7534	152	6	at	at	ADP
fuelectenerg-7534	152	7	structural	structural	ADJ
fuelectenerg-7534	152	8	level	level	NOUN
fuelectenerg-7534	152	9	by	by	ADP
fuelectenerg-7534	152	10	adopting	adopt	VERB
fuelectenerg-7534	152	11	bending	bend	VERB
fuelectenerg-7534	152	12	structures	structure	NOUN
fuelectenerg-7534	152	13	or	or	CCONJ
fuelectenerg-7534	152	14	by	by	ADP
fuelectenerg-7534	152	15	introducing	introduce	VERB
fuelectenerg-7534	152	16	floating	float	VERB
fuelectenerg-7534	152	17	metal	metal	NOUN
fuelectenerg-7534	152	18	layers	layer	NOUN
fuelectenerg-7534	152	19	.	.	PUNCT
fuelectenerg-7534	153	1	bending	bend	VERB
fuelectenerg-7534	153	2	structures	structure	NOUN
fuelectenerg-7534	153	3	,	,	PUNCT
fuelectenerg-7534	153	4	such	such	ADJ
fuelectenerg-7534	153	5	as	as	ADP
fuelectenerg-7534	153	6	warped	warped	ADJ
fuelectenerg-7534	153	7	beams	beam	NOUN
fuelectenerg-7534	153	8	or	or	CCONJ
fuelectenerg-7534	153	9	plates	plate	NOUN
fuelectenerg-7534	153	10	,	,	PUNCT
fuelectenerg-7534	153	11	represent	represent	VERB
fuelectenerg-7534	153	12	a	a	DET
fuelectenerg-7534	153	13	viable	viable	ADJ
fuelectenerg-7534	153	14	option	option	NOUN
fuelectenerg-7534	153	15	,	,	PUNCT
fuelectenerg-7534	153	16	but	but	CCONJ
fuelectenerg-7534	153	17	they	they	PRON
fuelectenerg-7534	153	18	may	may	AUX
fuelectenerg-7534	153	19	lead	lead	VERB
fuelectenerg-7534	153	20	to	to	ADP
fuelectenerg-7534	153	21	an	an	DET
fuelectenerg-7534	153	22	increased	increase	VERB
fuelectenerg-7534	153	23	actuation	actuation	NOUN
fuelectenerg-7534	153	24	voltage	voltage	NOUN
fuelectenerg-7534	153	25	.	.	PUNCT
fuelectenerg-7534	154	1	the	the	DET
fuelectenerg-7534	154	2	addition	addition	NOUN
fuelectenerg-7534	154	3	of	of	ADP
fuelectenerg-7534	154	4	a	a	DET
fuelectenerg-7534	154	5	floating	float	VERB
fuelectenerg-7534	154	6	layer	layer	NOUN
fuelectenerg-7534	154	7	generally	generally	ADV
fuelectenerg-7534	154	8	represents	represent	VERB
fuelectenerg-7534	154	9	a	a	DET
fuelectenerg-7534	154	10	better	well	ADJ
fuelectenerg-7534	154	11	solution	solution	NOUN
fuelectenerg-7534	154	12	:	:	PUNCT
fuelectenerg-7534	154	13	the	the	DET
fuelectenerg-7534	154	14	metal	metal	NOUN
fuelectenerg-7534	154	15	plate	plate	NOUN
fuelectenerg-7534	154	16	on	on	ADP
fuelectenerg-7534	154	17	top	top	NOUN
fuelectenerg-7534	154	18	of	of	ADP
fuelectenerg-7534	154	19	the	the	DET
fuelectenerg-7534	154	20	upper	upper	ADJ
fuelectenerg-7534	154	21	dielectric	dielectric	NOUN
fuelectenerg-7534	154	22	layer	layer	NOUN
fuelectenerg-7534	154	23	does	do	AUX
fuelectenerg-7534	154	24	not	not	PART
fuelectenerg-7534	154	25	affect	affect	VERB
fuelectenerg-7534	154	26	the	the	DET
fuelectenerg-7534	154	27	up	up	ADJ
fuelectenerg-7534	154	28	-	-	PUNCT
fuelectenerg-7534	154	29	state	state	NOUN
fuelectenerg-7534	154	30	capacitance	capacitance	NOUN
fuelectenerg-7534	154	31	,	,	PUNCT
fuelectenerg-7534	154	32	but	but	CCONJ
fuelectenerg-7534	154	33	it	it	PRON
fuelectenerg-7534	154	34	acts	act	VERB
fuelectenerg-7534	154	35	as	as	ADP
fuelectenerg-7534	154	36	a	a	DET
fuelectenerg-7534	154	37	wider	wide	ADJ
fuelectenerg-7534	154	38	upper	upper	ADJ
fuelectenerg-7534	154	39	plate	plate	NOUN
fuelectenerg-7534	154	40	of	of	ADP
fuelectenerg-7534	154	41	a	a	DET
fuelectenerg-7534	154	42	capacitor	capacitor	NOUN
fuelectenerg-7534	154	43	when	when	SCONJ
fuelectenerg-7534	154	44	the	the	DET
fuelectenerg-7534	154	45	membrane	membrane	NOUN
fuelectenerg-7534	154	46	is	be	AUX
fuelectenerg-7534	154	47	actuated	actuate	VERB
fuelectenerg-7534	154	48	.	.	PUNCT
fuelectenerg-7534	155	1	this	this	PRON
fuelectenerg-7534	155	2	leads	lead	VERB
fuelectenerg-7534	155	3	to	to	ADP
fuelectenerg-7534	155	4	a	a	DET
fuelectenerg-7534	155	5	higher	high	ADJ
fuelectenerg-7534	155	6	down	down	ADJ
fuelectenerg-7534	155	7	-	-	PUNCT
fuelectenerg-7534	155	8	state	state	NOUN
fuelectenerg-7534	155	9	capacitance	capacitance	NOUN
fuelectenerg-7534	155	10	.	.	PUNCT
fuelectenerg-7534	156	1	the	the	DET
fuelectenerg-7534	156	2	solution	solution	NOUN
fuelectenerg-7534	156	3	of	of	ADP
fuelectenerg-7534	156	4	a	a	DET
fuelectenerg-7534	156	5	floating	float	VERB
fuelectenerg-7534	156	6	metal	metal	NOUN
fuelectenerg-7534	156	7	layer	layer	NOUN
fuelectenerg-7534	156	8	should	should	AUX
fuelectenerg-7534	156	9	be	be	AUX
fuelectenerg-7534	156	10	preferred	prefer	VERB
fuelectenerg-7534	156	11	also	also	ADV
fuelectenerg-7534	156	12	because	because	SCONJ
fuelectenerg-7534	156	13	of	of	ADP
fuelectenerg-7534	156	14	a	a	DET
fuelectenerg-7534	156	15	practical	practical	ADJ
fuelectenerg-7534	156	16	issue	issue	NOUN
fuelectenerg-7534	156	17	:	:	PUNCT
fuelectenerg-7534	156	18	the	the	DET
fuelectenerg-7534	156	19	surface	surface	NOUN
fuelectenerg-7534	156	20	roughness	roughness	NOUN
fuelectenerg-7534	156	21	of	of	ADP
fuelectenerg-7534	156	22	the	the	DET
fuelectenerg-7534	156	23	dielectric	dielectric	NOUN
fuelectenerg-7534	156	24	is	be	AUX
fuelectenerg-7534	156	25	generally	generally	ADV
fuelectenerg-7534	156	26	not	not	PART
fuelectenerg-7534	156	27	accounted	account	VERB
fuelectenerg-7534	156	28	in	in	ADP
fuelectenerg-7534	156	29	simulations	simulation	NOUN
fuelectenerg-7534	156	30	.	.	PUNCT
fuelectenerg-7534	157	1	actuated	actuate	VERB
fuelectenerg-7534	157	2	membranes	membrane	NOUN
fuelectenerg-7534	157	3	with	with	ADP
fuelectenerg-7534	157	4	a	a	DET
fuelectenerg-7534	157	5	non	non	ADJ
fuelectenerg-7534	157	6	-	-	ADJ
fuelectenerg-7534	157	7	uniform	uniform	ADJ
fuelectenerg-7534	157	8	adhesion	adhesion	NOUN
fuelectenerg-7534	157	9	to	to	ADP
fuelectenerg-7534	157	10	the	the	DET
fuelectenerg-7534	157	11	underlying	underlie	VERB
fuelectenerg-7534	157	12	dielectric	dielectric	ADJ
fuelectenerg-7534	157	13	layer	layer	NOUN
fuelectenerg-7534	157	14	,	,	PUNCT
fuelectenerg-7534	157	15	or	or	CCONJ
fuelectenerg-7534	157	16	surface	surface	NOUN
fuelectenerg-7534	157	17	roughness	roughness	NOUN
fuelectenerg-7534	157	18	,	,	PUNCT
fuelectenerg-7534	157	19	will	will	AUX
fuelectenerg-7534	157	20	determine	determine	VERB
fuelectenerg-7534	157	21	an	an	DET
fuelectenerg-7534	157	22	interposed	interpose	VERB
fuelectenerg-7534	157	23	layer	layer	NOUN
fuelectenerg-7534	157	24	of	of	ADP
fuelectenerg-7534	157	25	air	air	NOUN
fuelectenerg-7534	157	26	,	,	PUNCT
fuelectenerg-7534	157	27	decreasing	decrease	VERB
fuelectenerg-7534	157	28	the	the	DET
fuelectenerg-7534	157	29	achievable	achievable	ADJ
fuelectenerg-7534	157	30	down	down	ADJ
fuelectenerg-7534	157	31	-	-	PUNCT
fuelectenerg-7534	157	32	state	state	NOUN
fuelectenerg-7534	157	33	capacitance	capacitance	NOUN
fuelectenerg-7534	157	34	[	[	X
fuelectenerg-7534	157	35	32][33	32][33	X
fuelectenerg-7534	157	36	]	]	PUNCT
fuelectenerg-7534	157	37	.	.	PUNCT
fuelectenerg-7534	158	1	the	the	DET
fuelectenerg-7534	158	2	adoption	adoption	NOUN
fuelectenerg-7534	158	3	of	of	ADP
fuelectenerg-7534	158	4	the	the	DET
fuelectenerg-7534	158	5	floating	float	VERB
fuelectenerg-7534	158	6	layer	layer	NOUN
fuelectenerg-7534	158	7	allows	allow	VERB
fuelectenerg-7534	158	8	to	to	PART
fuelectenerg-7534	158	9	overcome	overcome	VERB
fuelectenerg-7534	158	10	these	these	DET
fuelectenerg-7534	158	11	practical	practical	ADJ
fuelectenerg-7534	158	12	issues	issue	NOUN
fuelectenerg-7534	158	13	.	.	PUNCT
fuelectenerg-7534	159	1	regarding	regard	VERB
fuelectenerg-7534	159	2	the	the	DET
fuelectenerg-7534	159	3	substrate	substrate	NOUN
fuelectenerg-7534	159	4	and	and	CCONJ
fuelectenerg-7534	159	5	the	the	DET
fuelectenerg-7534	159	6	dielectric	dielectric	NOUN
fuelectenerg-7534	159	7	,	,	PUNCT
fuelectenerg-7534	159	8	the	the	DET
fuelectenerg-7534	159	9	choice	choice	NOUN
fuelectenerg-7534	159	10	of	of	ADP
fuelectenerg-7534	159	11	materials	material	NOUN
fuelectenerg-7534	159	12	and	and	CCONJ
fuelectenerg-7534	159	13	their	their	PRON
fuelectenerg-7534	159	14	thickness	thickness	NOUN
fuelectenerg-7534	159	15	is	be	AUX
fuelectenerg-7534	159	16	an	an	DET
fuelectenerg-7534	159	17	important	important	ADJ
fuelectenerg-7534	159	18	subject	subject	NOUN
fuelectenerg-7534	159	19	.	.	PUNCT
fuelectenerg-7534	160	1	good	good	ADJ
fuelectenerg-7534	160	2	electrical	electrical	ADJ
fuelectenerg-7534	160	3	performances	performance	NOUN
fuelectenerg-7534	160	4	are	be	AUX
fuelectenerg-7534	160	5	usually	usually	ADV
fuelectenerg-7534	160	6	obtained	obtain	VERB
fuelectenerg-7534	160	7	by	by	ADP
fuelectenerg-7534	160	8	using	use	VERB
fuelectenerg-7534	160	9	substrates	substrate	NOUN
fuelectenerg-7534	160	10	with	with	ADP
fuelectenerg-7534	160	11	high	high	ADJ
fuelectenerg-7534	160	12	resistivity	resistivity	NOUN
fuelectenerg-7534	160	13	,	,	PUNCT
fuelectenerg-7534	160	14	such	such	ADJ
fuelectenerg-7534	160	15	as	as	ADP
fuelectenerg-7534	160	16	quartz	quartz	NOUN
fuelectenerg-7534	160	17	,	,	PUNCT
fuelectenerg-7534	160	18	glass	glass	NOUN
fuelectenerg-7534	160	19	,	,	PUNCT
fuelectenerg-7534	160	20	high	high	ADJ
fuelectenerg-7534	160	21	-	-	PUNCT
fuelectenerg-7534	160	22	resistivity	resistivity	NOUN
fuelectenerg-7534	160	23	silicon	silicon	NOUN
fuelectenerg-7534	160	24	,	,	PUNCT
fuelectenerg-7534	160	25	gallium	gallium	NOUN
fuelectenerg-7534	160	26	arsenide	arsenide	NOUN
fuelectenerg-7534	160	27	(	(	PUNCT
fuelectenerg-7534	160	28	gaas	gaas	NOUN
fuelectenerg-7534	160	29	)	)	PUNCT
fuelectenerg-7534	160	30	or	or	CCONJ
fuelectenerg-7534	160	31	silicon	silicon	NOUN
fuelectenerg-7534	160	32	-	-	PUNCT
fuelectenerg-7534	160	33	on	on	ADP
fuelectenerg-7534	160	34	-	-	PUNCT
fuelectenerg-7534	160	35	glass	glass	NOUN
fuelectenerg-7534	160	36	(	(	PUNCT
fuelectenerg-7534	160	37	siog	siog	PROPN
fuelectenerg-7534	160	38	)	)	PUNCT
fuelectenerg-7534	161	1	[	[	X
fuelectenerg-7534	161	2	34][35][36	34][35][36	NUM
fuelectenerg-7534	161	3	]	]	PUNCT
fuelectenerg-7534	161	4	.	.	PUNCT
fuelectenerg-7534	162	1	in	in	ADP
fuelectenerg-7534	162	2	case	case	NOUN
fuelectenerg-7534	162	3	of	of	ADP
fuelectenerg-7534	162	4	capacitive	capacitive	ADJ
fuelectenerg-7534	162	5	switches	switch	NOUN
fuelectenerg-7534	162	6	,	,	PUNCT
fuelectenerg-7534	162	7	dielectric	dielectric	ADJ
fuelectenerg-7534	162	8	materials	material	NOUN
fuelectenerg-7534	162	9	with	with	ADP
fuelectenerg-7534	162	10	a	a	DET
fuelectenerg-7534	162	11	high	high	ADJ
fuelectenerg-7534	162	12	permittivity	permittivity	NOUN
fuelectenerg-7534	162	13	and	and	CCONJ
fuelectenerg-7534	162	14	arranged	arrange	VERB
fuelectenerg-7534	162	15	in	in	ADP
fuelectenerg-7534	162	16	very	very	ADV
fuelectenerg-7534	162	17	thin	thin	ADJ
fuelectenerg-7534	162	18	layer	layer	NOUN
fuelectenerg-7534	162	19	are	be	AUX
fuelectenerg-7534	162	20	preferable	preferable	ADJ
fuelectenerg-7534	162	21	,	,	PUNCT
fuelectenerg-7534	162	22	since	since	SCONJ
fuelectenerg-7534	162	23	they	they	PRON
fuelectenerg-7534	162	24	ensure	ensure	VERB
fuelectenerg-7534	162	25	a	a	DET
fuelectenerg-7534	162	26	high	high	ADJ
fuelectenerg-7534	162	27	capacitance	capacitance	NOUN
fuelectenerg-7534	162	28	when	when	SCONJ
fuelectenerg-7534	162	29	the	the	DET
fuelectenerg-7534	162	30	membrane	membrane	NOUN
fuelectenerg-7534	162	31	is	be	AUX
fuelectenerg-7534	162	32	actuated	actuate	VERB
fuelectenerg-7534	162	33	.	.	PUNCT
fuelectenerg-7534	163	1	the	the	DET
fuelectenerg-7534	163	2	main	main	ADJ
fuelectenerg-7534	163	3	candidates	candidate	NOUN
fuelectenerg-7534	163	4	are	be	AUX
fuelectenerg-7534	163	5	piezoelectric	piezoelectric	ADJ
fuelectenerg-7534	163	6	leade	leade	PROPN
fuelectenerg-7534	163	7	zirconate	zirconate	NOUN
fuelectenerg-7534	163	8	titanate	titanate	NOUN
fuelectenerg-7534	163	9	(	(	PUNCT
fuelectenerg-7534	163	10	pzt	pzt	NOUN
fuelectenerg-7534	163	11	)	)	PUNCT
fuelectenerg-7534	163	12	,	,	PUNCT
fuelectenerg-7534	163	13	strontium	strontium	NOUN
fuelectenerg-7534	163	14	titanate	titanate	NOUN
fuelectenerg-7534	163	15	oxide	oxide	NOUN
fuelectenerg-7534	163	16	(	(	PUNCT
fuelectenerg-7534	163	17	srtio3	srtio3	ADJ
fuelectenerg-7534	163	18	)	)	PUNCT
fuelectenerg-7534	163	19	,	,	PUNCT
fuelectenerg-7534	163	20	tantalum	tantalum	NOUN
fuelectenerg-7534	163	21	pentoxide	pentoxide	NOUN
fuelectenerg-7534	163	22	(	(	PUNCT
fuelectenerg-7534	163	23	ta2o5	ta2o5	PROPN
fuelectenerg-7534	163	24	)	)	PUNCT
fuelectenerg-7534	163	25	and	and	CCONJ
fuelectenerg-7534	163	26	hafnium	hafnium	NOUN
fuelectenerg-7534	163	27	dioxide	dioxide	NOUN
fuelectenerg-7534	163	28	(	(	PUNCT
fuelectenerg-7534	163	29	hfo2	hfo2	NOUN
fuelectenerg-7534	163	30	)	)	PUNCT
fuelectenerg-7534	164	1	[	[	X
fuelectenerg-7534	164	2	37][38][39	37][38][39	NUM
fuelectenerg-7534	164	3	]	]	X
fuelectenerg-7534	164	4	.	.	PUNCT
fuelectenerg-7534	165	1	however	however	ADV
fuelectenerg-7534	165	2	,	,	PUNCT
fuelectenerg-7534	165	3	while	while	SCONJ
fuelectenerg-7534	165	4	some	some	PRON
fuelectenerg-7534	165	5	of	of	ADP
fuelectenerg-7534	165	6	them	they	PRON
fuelectenerg-7534	165	7	are	be	AUX
fuelectenerg-7534	165	8	relatively	relatively	ADV
fuelectenerg-7534	165	9	expensive	expensive	ADJ
fuelectenerg-7534	165	10	,	,	PUNCT
fuelectenerg-7534	165	11	the	the	DET
fuelectenerg-7534	165	12	thickness	thickness	NOUN
fuelectenerg-7534	165	13	of	of	ADP
fuelectenerg-7534	165	14	the	the	DET
fuelectenerg-7534	165	15	dielectric	dielectric	NOUN
fuelectenerg-7534	165	16	must	must	AUX
fuelectenerg-7534	165	17	be	be	AUX
fuelectenerg-7534	165	18	chosen	choose	VERB
fuelectenerg-7534	165	19	accordingly	accordingly	ADV
fuelectenerg-7534	165	20	to	to	ADP
fuelectenerg-7534	165	21	the	the	DET
fuelectenerg-7534	165	22	available	available	ADJ
fuelectenerg-7534	165	23	fabrication	fabrication	NOUN
fuelectenerg-7534	165	24	process	process	NOUN
fuelectenerg-7534	165	25	,	,	PUNCT
fuelectenerg-7534	165	26	and	and	CCONJ
fuelectenerg-7534	165	27	it	it	PRON
fuelectenerg-7534	165	28	must	must	AUX
fuelectenerg-7534	165	29	ensure	ensure	VERB
fuelectenerg-7534	165	30	to	to	PART
fuelectenerg-7534	165	31	sustain	sustain	VERB
fuelectenerg-7534	165	32	the	the	DET
fuelectenerg-7534	165	33	pull	pull	VERB
fuelectenerg-7534	165	34	-	-	PUNCT
fuelectenerg-7534	165	35	in	in	ADP
fuelectenerg-7534	165	36	voltage	voltage	NOUN
fuelectenerg-7534	165	37	without	without	ADP
fuelectenerg-7534	165	38	a	a	DET
fuelectenerg-7534	165	39	breakdown	breakdown	NOUN
fuelectenerg-7534	165	40	.	.	PUNCT
fuelectenerg-7534	166	1	the	the	DET
fuelectenerg-7534	166	2	introduction	introduction	NOUN
fuelectenerg-7534	166	3	of	of	ADP
fuelectenerg-7534	166	4	additional	additional	ADJ
fuelectenerg-7534	166	5	electrical	electrical	ADJ
fuelectenerg-7534	166	6	components	component	NOUN
fuelectenerg-7534	166	7	generally	generally	ADV
fuelectenerg-7534	166	8	involves	involve	VERB
fuelectenerg-7534	166	9	the	the	DET
fuelectenerg-7534	166	10	deployment	deployment	NOUN
fuelectenerg-7534	166	11	of	of	ADP
fuelectenerg-7534	166	12	shunt	shunt	NOUN
fuelectenerg-7534	166	13	inductors	inductor	NOUN
fuelectenerg-7534	166	14	or	or	CCONJ
fuelectenerg-7534	166	15	sections	section	NOUN
fuelectenerg-7534	166	16	of	of	ADP
fuelectenerg-7534	166	17	transmission	transmission	NOUN
fuelectenerg-7534	166	18	lines	line	NOUN
fuelectenerg-7534	166	19	.	.	PUNCT
fuelectenerg-7534	167	1	in	in	ADP
fuelectenerg-7534	167	2	fact	fact	NOUN
fuelectenerg-7534	167	3	,	,	PUNCT
fuelectenerg-7534	167	4	the	the	DET
fuelectenerg-7534	167	5	beams	beam	NOUN
fuelectenerg-7534	167	6	supporting	support	VERB
fuelectenerg-7534	167	7	the	the	DET
fuelectenerg-7534	167	8	movable	movable	ADJ
fuelectenerg-7534	167	9	structure	structure	NOUN
fuelectenerg-7534	167	10	introduce	introduce	VERB
fuelectenerg-7534	167	11	some	some	DET
fuelectenerg-7534	167	12	parasitic	parasitic	ADJ
fuelectenerg-7534	167	13	inductance	inductance	NOUN
fuelectenerg-7534	167	14	,	,	PUNCT
fuelectenerg-7534	167	15	affecting	affect	VERB
fuelectenerg-7534	167	16	the	the	DET
fuelectenerg-7534	167	17	isolation	isolation	NOUN
fuelectenerg-7534	167	18	of	of	ADP
fuelectenerg-7534	167	19	the	the	DET
fuelectenerg-7534	167	20	device	device	NOUN
fuelectenerg-7534	167	21	.	.	PUNCT
fuelectenerg-7534	168	1	this	this	DET
fuelectenerg-7534	168	2	inductance	inductance	NOUN
fuelectenerg-7534	168	3	is	be	AUX
fuelectenerg-7534	168	4	generally	generally	ADV
fuelectenerg-7534	168	5	compensated	compensate	VERB
fuelectenerg-7534	168	6	by	by	ADP
fuelectenerg-7534	168	7	introducing	introduce	VERB
fuelectenerg-7534	168	8	matching	matching	NOUN
fuelectenerg-7534	168	9	sections	section	NOUN
fuelectenerg-7534	168	10	or	or	CCONJ
fuelectenerg-7534	168	11	reactive	reactive	ADJ
fuelectenerg-7534	168	12	components	component	NOUN
fuelectenerg-7534	168	13	[	[	X
fuelectenerg-7534	168	14	29	29	NUM
fuelectenerg-7534	168	15	]	]	PUNCT
fuelectenerg-7534	168	16	.	.	PUNCT
fuelectenerg-7534	169	1	reliability	reliability	NOUN
fuelectenerg-7534	169	2	is	be	AUX
fuelectenerg-7534	169	3	an	an	DET
fuelectenerg-7534	169	4	important	important	ADJ
fuelectenerg-7534	169	5	issue	issue	NOUN
fuelectenerg-7534	169	6	,	,	PUNCT
fuelectenerg-7534	169	7	investigated	investigate	VERB
fuelectenerg-7534	169	8	in	in	ADP
fuelectenerg-7534	169	9	depth	depth	NOUN
fuelectenerg-7534	169	10	in	in	ADP
fuelectenerg-7534	169	11	the	the	DET
fuelectenerg-7534	169	12	framework	framework	NOUN
fuelectenerg-7534	169	13	of	of	ADP
fuelectenerg-7534	169	14	rf	rf	ADJ
fuelectenerg-7534	169	15	-	-	PUNCT
fuelectenerg-7534	169	16	mems	mem	NOUN
fuelectenerg-7534	169	17	devices	device	NOUN
fuelectenerg-7534	169	18	,	,	PUNCT
fuelectenerg-7534	169	19	thus	thus	ADV
fuelectenerg-7534	169	20	different	different	ADJ
fuelectenerg-7534	169	21	strategies	strategy	NOUN
fuelectenerg-7534	169	22	have	have	AUX
fuelectenerg-7534	169	23	been	be	AUX
fuelectenerg-7534	169	24	proposed	propose	VERB
fuelectenerg-7534	169	25	so	so	ADV
fuelectenerg-7534	169	26	far	far	ADV
fuelectenerg-7534	169	27	.	.	PUNCT
fuelectenerg-7534	170	1	the	the	DET
fuelectenerg-7534	170	2	occurrence	occurrence	NOUN
fuelectenerg-7534	170	3	of	of	ADP
fuelectenerg-7534	170	4	stiction	stiction	NOUN
fuelectenerg-7534	170	5	can	can	AUX
fuelectenerg-7534	170	6	be	be	AUX
fuelectenerg-7534	170	7	mitigated	mitigate	VERB
fuelectenerg-7534	170	8	or	or	CCONJ
fuelectenerg-7534	170	9	counteracted	counteract	VERB
fuelectenerg-7534	170	10	by	by	ADP
fuelectenerg-7534	170	11	some	some	PRON
fuelectenerg-7534	170	12	of	of	ADP
fuelectenerg-7534	170	13	the	the	DET
fuelectenerg-7534	170	14	already	already	ADV
fuelectenerg-7534	170	15	mentioned	mention	VERB
fuelectenerg-7534	170	16	strategies	strategy	NOUN
fuelectenerg-7534	170	17	,	,	PUNCT
fuelectenerg-7534	170	18	such	such	ADJ
fuelectenerg-7534	170	19	as	as	ADP
fuelectenerg-7534	170	20	the	the	DET
fuelectenerg-7534	170	21	insertion	insertion	NOUN
fuelectenerg-7534	170	22	of	of	ADP
fuelectenerg-7534	170	23	additional	additional	ADJ
fuelectenerg-7534	170	24	electrodes	electrode	NOUN
fuelectenerg-7534	170	25	to	to	PART
fuelectenerg-7534	170	26	enforce	enforce	VERB
fuelectenerg-7534	170	27	the	the	DET
fuelectenerg-7534	170	28	release	release	NOUN
fuelectenerg-7534	170	29	,	,	PUNCT
fuelectenerg-7534	170	30	the	the	DET
fuelectenerg-7534	170	31	decrease	decrease	NOUN
fuelectenerg-7534	170	32	of	of	ADP
fuelectenerg-7534	170	33	pull	pull	NOUN
fuelectenerg-7534	170	34	-	-	PUNCT
fuelectenerg-7534	170	35	in	in	ADP
fuelectenerg-7534	170	36	voltage	voltage	NOUN
fuelectenerg-7534	170	37	,	,	PUNCT
fuelectenerg-7534	170	38	the	the	DET
fuelectenerg-7534	170	39	modification	modification	NOUN
fuelectenerg-7534	170	40	of	of	ADP
fuelectenerg-7534	170	41	voltage	voltage	NOUN
fuelectenerg-7534	170	42	actuation	actuation	NOUN
fuelectenerg-7534	170	43	waveform	waveform	NOUN
fuelectenerg-7534	170	44	or	or	CCONJ
fuelectenerg-7534	170	45	the	the	DET
fuelectenerg-7534	170	46	adoption	adoption	NOUN
fuelectenerg-7534	170	47	of	of	ADP
fuelectenerg-7534	170	48	additional	additional	ADJ
fuelectenerg-7534	170	49	shunt	shunt	NOUN
fuelectenerg-7534	170	50	membranes	membrane	NOUN
fuelectenerg-7534	170	51	.	.	PUNCT
fuelectenerg-7534	171	1	beside	beside	ADP
fuelectenerg-7534	171	2	these	these	DET
fuelectenerg-7534	171	3	techniques	technique	NOUN
fuelectenerg-7534	171	4	,	,	PUNCT
fuelectenerg-7534	171	5	other	other	ADJ
fuelectenerg-7534	171	6	expedients	expedient	NOUN
fuelectenerg-7534	171	7	regarding	regard	VERB
fuelectenerg-7534	171	8	the	the	DET
fuelectenerg-7534	171	9	structure	structure	NOUN
fuelectenerg-7534	171	10	and	and	CCONJ
fuelectenerg-7534	171	11	employed	employ	VERB
fuelectenerg-7534	171	12	materials	material	NOUN
fuelectenerg-7534	171	13	can	can	AUX
fuelectenerg-7534	171	14	be	be	AUX
fuelectenerg-7534	171	15	listed	list	VERB
fuelectenerg-7534	171	16	.	.	PUNCT
fuelectenerg-7534	172	1	from	from	ADP
fuelectenerg-7534	172	2	a	a	DET
fuelectenerg-7534	172	3	structural	structural	ADJ
fuelectenerg-7534	172	4	point	point	NOUN
fuelectenerg-7534	172	5	of	of	ADP
fuelectenerg-7534	172	6	view	view	NOUN
fuelectenerg-7534	172	7	,	,	PUNCT
fuelectenerg-7534	172	8	the	the	DET
fuelectenerg-7534	172	9	most	most	ADV
fuelectenerg-7534	172	10	common	common	ADJ
fuelectenerg-7534	172	11	are	be	AUX
fuelectenerg-7534	172	12	the	the	DET
fuelectenerg-7534	172	13	use	use	NOUN
fuelectenerg-7534	172	14	of	of	ADP
fuelectenerg-7534	172	15	frames	frame	NOUN
fuelectenerg-7534	172	16	with	with	ADP
fuelectenerg-7534	172	17	reinforcing	reinforce	VERB
fuelectenerg-7534	172	18	bars	bar	NOUN
fuelectenerg-7534	172	19	on	on	ADP
fuelectenerg-7534	172	20	the	the	DET
fuelectenerg-7534	172	21	movable	movable	ADJ
fuelectenerg-7534	172	22	structure	structure	NOUN
fuelectenerg-7534	172	23	,	,	PUNCT
fuelectenerg-7534	172	24	and	and	CCONJ
fuelectenerg-7534	172	25	stopping	stop	VERB
fuelectenerg-7534	172	26	pillars	pillar	NOUN
fuelectenerg-7534	172	27	or	or	CCONJ
fuelectenerg-7534	172	28	thin	thin	ADJ
fuelectenerg-7534	172	29	posts	post	NOUN
fuelectenerg-7534	172	30	under	under	ADP
fuelectenerg-7534	172	31	the	the	DET
fuelectenerg-7534	172	32	membrane	membrane	NOUN
fuelectenerg-7534	172	33	[	[	X
fuelectenerg-7534	172	34	40	40	NUM
fuelectenerg-7534	172	35	]	]	PUNCT
fuelectenerg-7534	172	36	.	.	PUNCT
fuelectenerg-7534	173	1	the	the	DET
fuelectenerg-7534	173	2	underlying	underlying	ADJ
fuelectenerg-7534	173	3	idea	idea	NOUN
fuelectenerg-7534	173	4	is	be	AUX
fuelectenerg-7534	173	5	to	to	PART
fuelectenerg-7534	173	6	prevent	prevent	VERB
fuelectenerg-7534	173	7	deformations	deformation	NOUN
fuelectenerg-7534	173	8	of	of	ADP
fuelectenerg-7534	173	9	the	the	DET
fuelectenerg-7534	173	10	membrane	membrane	NOUN
fuelectenerg-7534	173	11	and	and	CCONJ
fuelectenerg-7534	173	12	its	its	PRON
fuelectenerg-7534	173	13	complete	complete	ADJ
fuelectenerg-7534	173	14	adhesion	adhesion	NOUN
fuelectenerg-7534	173	15	to	to	ADP
fuelectenerg-7534	173	16	the	the	DET
fuelectenerg-7534	173	17	dielectric	dielectric	ADJ
fuelectenerg-7534	173	18	layer	layer	NOUN
fuelectenerg-7534	173	19	,	,	PUNCT
fuelectenerg-7534	173	20	in	in	ADP
fuelectenerg-7534	173	21	which	which	PRON
fuelectenerg-7534	173	22	residual	residual	ADJ
fuelectenerg-7534	173	23	trapped	trap	VERB
fuelectenerg-7534	173	24	charges	charge	NOUN
fuelectenerg-7534	173	25	may	may	AUX
fuelectenerg-7534	173	26	be	be	AUX
fuelectenerg-7534	173	27	present	present	ADJ
fuelectenerg-7534	173	28	.	.	PUNCT
fuelectenerg-7534	174	1	other	other	ADJ
fuelectenerg-7534	174	2	342	342	NUM
fuelectenerg-7534	174	3	g.	g.	NOUN
fuelectenerg-7534	174	4	tagliapietra	tagliapietra	PROPN
fuelectenerg-7534	174	5	,	,	PUNCT
fuelectenerg-7534	174	6	j.	j.	PROPN
fuelectenerg-7534	174	7	iannacci	iannacci	PROPN
fuelectenerg-7534	174	8	possibilities	possibility	NOUN
fuelectenerg-7534	174	9	to	to	PART
fuelectenerg-7534	174	10	overcome	overcome	VERB
fuelectenerg-7534	174	11	the	the	DET
fuelectenerg-7534	174	12	problem	problem	NOUN
fuelectenerg-7534	174	13	of	of	ADP
fuelectenerg-7534	174	14	trapped	trap	VERB
fuelectenerg-7534	174	15	charge	charge	NOUN
fuelectenerg-7534	174	16	is	be	AUX
fuelectenerg-7534	174	17	the	the	DET
fuelectenerg-7534	174	18	adoption	adoption	NOUN
fuelectenerg-7534	174	19	of	of	ADP
fuelectenerg-7534	174	20	lateral	lateral	ADJ
fuelectenerg-7534	174	21	actuation	actuation	NOUN
fuelectenerg-7534	174	22	mechanisms	mechanism	NOUN
fuelectenerg-7534	174	23	,	,	PUNCT
fuelectenerg-7534	174	24	as	as	ADP
fuelectenerg-7534	174	25	in	in	ADP
fuelectenerg-7534	174	26	[	[	X
fuelectenerg-7534	174	27	17	17	NUM
fuelectenerg-7534	174	28	]	]	PUNCT
fuelectenerg-7534	174	29	,	,	PUNCT
fuelectenerg-7534	174	30	or	or	CCONJ
fuelectenerg-7534	174	31	the	the	DET
fuelectenerg-7534	174	32	more	more	ADV
fuelectenerg-7534	174	33	"	"	PUNCT
fuelectenerg-7534	174	34	radical	radical	ADJ
fuelectenerg-7534	174	35	"	"	PUNCT
fuelectenerg-7534	174	36	option	option	NOUN
fuelectenerg-7534	174	37	of	of	ADP
fuelectenerg-7534	174	38	a	a	DET
fuelectenerg-7534	174	39	dielectric	dielectric	NOUN
fuelectenerg-7534	174	40	-	-	PUNCT
fuelectenerg-7534	174	41	less	less	ADJ
fuelectenerg-7534	174	42	design	design	NOUN
fuelectenerg-7534	174	43	[	[	X
fuelectenerg-7534	174	44	41	41	NUM
fuelectenerg-7534	174	45	]	]	PUNCT
fuelectenerg-7534	174	46	.	.	PUNCT
fuelectenerg-7534	175	1	an	an	DET
fuelectenerg-7534	175	2	increased	increase	VERB
fuelectenerg-7534	175	3	lifetime	lifetime	NOUN
fuelectenerg-7534	175	4	of	of	ADP
fuelectenerg-7534	175	5	the	the	DET
fuelectenerg-7534	175	6	device	device	NOUN
fuelectenerg-7534	175	7	can	can	AUX
fuelectenerg-7534	175	8	be	be	AUX
fuelectenerg-7534	175	9	achieved	achieve	VERB
fuelectenerg-7534	175	10	also	also	ADV
fuelectenerg-7534	175	11	by	by	ADP
fuelectenerg-7534	175	12	a	a	DET
fuelectenerg-7534	175	13	proper	proper	ADJ
fuelectenerg-7534	175	14	selection	selection	NOUN
fuelectenerg-7534	175	15	of	of	ADP
fuelectenerg-7534	175	16	materials	material	NOUN
fuelectenerg-7534	175	17	.	.	PUNCT
fuelectenerg-7534	176	1	in	in	ADP
fuelectenerg-7534	176	2	case	case	NOUN
fuelectenerg-7534	176	3	of	of	ADP
fuelectenerg-7534	176	4	ohmic	ohmic	ADJ
fuelectenerg-7534	176	5	switches	switch	NOUN
fuelectenerg-7534	176	6	,	,	PUNCT
fuelectenerg-7534	176	7	stiction	stiction	NOUN
fuelectenerg-7534	176	8	is	be	AUX
fuelectenerg-7534	176	9	mainly	mainly	ADV
fuelectenerg-7534	176	10	caused	cause	VERB
fuelectenerg-7534	176	11	by	by	ADP
fuelectenerg-7534	176	12	increase	increase	NOUN
fuelectenerg-7534	176	13	of	of	ADP
fuelectenerg-7534	176	14	resistance	resistance	NOUN
fuelectenerg-7534	176	15	,	,	PUNCT
fuelectenerg-7534	176	16	welding	welding	NOUN
fuelectenerg-7534	176	17	,	,	PUNCT
fuelectenerg-7534	176	18	fusion	fusion	NOUN
fuelectenerg-7534	176	19	or	or	CCONJ
fuelectenerg-7534	176	20	transfer	transfer	NOUN
fuelectenerg-7534	176	21	of	of	ADP
fuelectenerg-7534	176	22	metal	metal	NOUN
fuelectenerg-7534	176	23	contacts	contact	NOUN
fuelectenerg-7534	176	24	.	.	PUNCT
fuelectenerg-7534	177	1	this	this	PRON
fuelectenerg-7534	177	2	is	be	AUX
fuelectenerg-7534	177	3	generally	generally	ADV
fuelectenerg-7534	177	4	prevented	prevent	VERB
fuelectenerg-7534	177	5	by	by	ADP
fuelectenerg-7534	177	6	the	the	DET
fuelectenerg-7534	177	7	adoption	adoption	NOUN
fuelectenerg-7534	177	8	of	of	ADP
fuelectenerg-7534	177	9	harder	hard	ADJ
fuelectenerg-7534	177	10	metals	metal	NOUN
fuelectenerg-7534	177	11	,	,	PUNCT
fuelectenerg-7534	177	12	such	such	ADJ
fuelectenerg-7534	177	13	as	as	ADP
fuelectenerg-7534	177	14	molybdenum	molybdenum	NOUN
fuelectenerg-7534	177	15	(	(	PUNCT
fuelectenerg-7534	177	16	mo	mo	PROPN
fuelectenerg-7534	177	17	)	)	PUNCT
fuelectenerg-7534	177	18	,	,	PUNCT
fuelectenerg-7534	177	19	palladium	palladium	NOUN
fuelectenerg-7534	177	20	(	(	PUNCT
fuelectenerg-7534	177	21	pd	pd	NOUN
fuelectenerg-7534	177	22	)	)	PUNCT
fuelectenerg-7534	177	23	,	,	PUNCT
fuelectenerg-7534	177	24	tungsten	tungsten	NOUN
fuelectenerg-7534	177	25	(	(	PUNCT
fuelectenerg-7534	177	26	w	w	NOUN
fuelectenerg-7534	177	27	)	)	PUNCT
fuelectenerg-7534	177	28	and	and	CCONJ
fuelectenerg-7534	177	29	rhodium	rhodium	NOUN
fuelectenerg-7534	177	30	(	(	PUNCT
fuelectenerg-7534	177	31	re	re	NOUN
fuelectenerg-7534	177	32	)	)	PUNCT
fuelectenerg-7534	177	33	,	,	PUNCT
fuelectenerg-7534	177	34	often	often	ADV
fuelectenerg-7534	177	35	organized	organize	VERB
fuelectenerg-7534	177	36	in	in	ADP
fuelectenerg-7534	177	37	multilayers	multilayer	NOUN
fuelectenerg-7534	177	38	[	[	X
fuelectenerg-7534	177	39	42][43][44	42][43][44	NOUN
fuelectenerg-7534	177	40	]	]	PUNCT
fuelectenerg-7534	177	41	.	.	PUNCT
fuelectenerg-7534	178	1	in	in	ADP
fuelectenerg-7534	178	2	case	case	NOUN
fuelectenerg-7534	178	3	of	of	ADP
fuelectenerg-7534	178	4	capacitive	capacitive	ADJ
fuelectenerg-7534	178	5	switches	switch	NOUN
fuelectenerg-7534	178	6	,	,	PUNCT
fuelectenerg-7534	178	7	besides	besides	SCONJ
fuelectenerg-7534	178	8	charge	charge	NOUN
fuelectenerg-7534	178	9	injection	injection	NOUN
fuelectenerg-7534	178	10	and	and	CCONJ
fuelectenerg-7534	178	11	trapping	trap	VERB
fuelectenerg-7534	178	12	,	,	PUNCT
fuelectenerg-7534	178	13	reliability	reliability	NOUN
fuelectenerg-7534	178	14	is	be	AUX
fuelectenerg-7534	178	15	threatened	threaten	VERB
fuelectenerg-7534	178	16	by	by	ADP
fuelectenerg-7534	178	17	mechanical	mechanical	ADJ
fuelectenerg-7534	178	18	shock	shock	NOUN
fuelectenerg-7534	178	19	and	and	CCONJ
fuelectenerg-7534	178	20	the	the	DET
fuelectenerg-7534	178	21	breakdown	breakdown	NOUN
fuelectenerg-7534	178	22	of	of	ADP
fuelectenerg-7534	178	23	the	the	DET
fuelectenerg-7534	178	24	dielectric	dielectric	ADJ
fuelectenerg-7534	178	25	layer	layer	NOUN
fuelectenerg-7534	178	26	.	.	PUNCT
fuelectenerg-7534	179	1	these	these	DET
fuelectenerg-7534	179	2	problems	problem	NOUN
fuelectenerg-7534	179	3	can	can	AUX
fuelectenerg-7534	179	4	be	be	AUX
fuelectenerg-7534	179	5	mitigated	mitigate	VERB
fuelectenerg-7534	179	6	by	by	ADP
fuelectenerg-7534	179	7	using	use	VERB
fuelectenerg-7534	179	8	layers	layer	NOUN
fuelectenerg-7534	179	9	that	that	PRON
fuelectenerg-7534	179	10	may	may	AUX
fuelectenerg-7534	179	11	rapidly	rapidly	ADV
fuelectenerg-7534	179	12	release	release	VERB
fuelectenerg-7534	179	13	charges	charge	NOUN
fuelectenerg-7534	179	14	,	,	PUNCT
fuelectenerg-7534	179	15	such	such	ADJ
fuelectenerg-7534	179	16	as	as	ADP
fuelectenerg-7534	179	17	aluminium	aluminium	NOUN
fuelectenerg-7534	179	18	nitride	nitride	NOUN
fuelectenerg-7534	179	19	(	(	PUNCT
fuelectenerg-7534	179	20	aln	aln	PROPN
fuelectenerg-7534	179	21	)	)	PUNCT
fuelectenerg-7534	179	22	and	and	CCONJ
fuelectenerg-7534	179	23	pzt	pzt	NOUN
fuelectenerg-7534	180	1	[	[	X
fuelectenerg-7534	180	2	45	45	NUM
fuelectenerg-7534	180	3	]	]	PUNCT
fuelectenerg-7534	180	4	,	,	PUNCT
fuelectenerg-7534	180	5	by	by	ADP
fuelectenerg-7534	180	6	removing	remove	VERB
fuelectenerg-7534	180	7	surface	surface	NOUN
fuelectenerg-7534	180	8	roughness	roughness	NOUN
fuelectenerg-7534	180	9	and	and	CCONJ
fuelectenerg-7534	180	10	nonidealities	nonidealitie	NOUN
fuelectenerg-7534	180	11	,	,	PUNCT
fuelectenerg-7534	180	12	or	or	CCONJ
fuelectenerg-7534	180	13	by	by	ADP
fuelectenerg-7534	180	14	adopting	adopt	VERB
fuelectenerg-7534	180	15	robust	robust	ADJ
fuelectenerg-7534	180	16	structures	structure	NOUN
fuelectenerg-7534	180	17	with	with	ADP
fuelectenerg-7534	180	18	double	double	ADJ
fuelectenerg-7534	180	19	dielectric	dielectric	ADJ
fuelectenerg-7534	180	20	layers	layer	NOUN
fuelectenerg-7534	180	21	.	.	PUNCT
fuelectenerg-7534	181	1	3	3	X
fuelectenerg-7534	181	2	.	.	X
fuelectenerg-7534	181	3	packaging	packaging	NOUN
fuelectenerg-7534	181	4	when	when	SCONJ
fuelectenerg-7534	181	5	talking	talk	VERB
fuelectenerg-7534	181	6	about	about	ADP
fuelectenerg-7534	181	7	reliability	reliability	NOUN
fuelectenerg-7534	181	8	of	of	ADP
fuelectenerg-7534	181	9	mems	mem	NOUN
fuelectenerg-7534	181	10	components	component	NOUN
fuelectenerg-7534	181	11	,	,	PUNCT
fuelectenerg-7534	181	12	it	it	PRON
fuelectenerg-7534	181	13	is	be	AUX
fuelectenerg-7534	181	14	not	not	PART
fuelectenerg-7534	181	15	possible	possible	ADJ
fuelectenerg-7534	181	16	to	to	PART
fuelectenerg-7534	181	17	omit	omit	VERB
fuelectenerg-7534	181	18	the	the	DET
fuelectenerg-7534	181	19	closely	closely	ADV
fuelectenerg-7534	181	20	related	relate	VERB
fuelectenerg-7534	181	21	field	field	NOUN
fuelectenerg-7534	181	22	of	of	ADP
fuelectenerg-7534	181	23	packaging	packaging	NOUN
fuelectenerg-7534	181	24	.	.	PUNCT
fuelectenerg-7534	182	1	besides	besides	SCONJ
fuelectenerg-7534	182	2	enclosing	enclose	VERB
fuelectenerg-7534	182	3	mems	mem	NOUN
fuelectenerg-7534	182	4	structures	structure	NOUN
fuelectenerg-7534	182	5	in	in	ADP
fuelectenerg-7534	182	6	a	a	DET
fuelectenerg-7534	182	7	“	"	PUNCT
fuelectenerg-7534	182	8	sealed	seal	VERB
fuelectenerg-7534	182	9	”	"	PUNCT
fuelectenerg-7534	182	10	space	space	NOUN
fuelectenerg-7534	182	11	,	,	PUNCT
fuelectenerg-7534	182	12	less	less	ADV
fuelectenerg-7534	182	13	sensitive	sensitive	ADJ
fuelectenerg-7534	182	14	to	to	ADP
fuelectenerg-7534	182	15	changes	change	NOUN
fuelectenerg-7534	182	16	of	of	ADP
fuelectenerg-7534	182	17	temperature	temperature	NOUN
fuelectenerg-7534	182	18	or	or	CCONJ
fuelectenerg-7534	182	19	humidity	humidity	NOUN
fuelectenerg-7534	182	20	,	,	PUNCT
fuelectenerg-7534	182	21	packaging	packaging	NOUN
fuelectenerg-7534	182	22	avoids	avoid	VERB
fuelectenerg-7534	182	23	contamination	contamination	NOUN
fuelectenerg-7534	182	24	with	with	ADP
fuelectenerg-7534	182	25	harmful	harmful	ADJ
fuelectenerg-7534	182	26	agents	agent	NOUN
fuelectenerg-7534	182	27	and	and	CCONJ
fuelectenerg-7534	182	28	external	external	ADJ
fuelectenerg-7534	182	29	mechanical	mechanical	ADJ
fuelectenerg-7534	182	30	shocks	shock	NOUN
fuelectenerg-7534	182	31	.	.	PUNCT
fuelectenerg-7534	183	1	however	however	ADV
fuelectenerg-7534	183	2	,	,	PUNCT
fuelectenerg-7534	183	3	this	this	DET
fuelectenerg-7534	183	4	indispensable	indispensable	ADJ
fuelectenerg-7534	183	5	interface	interface	NOUN
fuelectenerg-7534	183	6	to	to	ADP
fuelectenerg-7534	183	7	outer	outer	ADJ
fuelectenerg-7534	183	8	world	world	NOUN
fuelectenerg-7534	183	9	introduces	introduce	NOUN
fuelectenerg-7534	183	10	:	:	PUNCT
fuelectenerg-7534	183	11	additional	additional	ADJ
fuelectenerg-7534	183	12	costs	cost	NOUN
fuelectenerg-7534	183	13	of	of	ADP
fuelectenerg-7534	183	14	production	production	NOUN
fuelectenerg-7534	183	15	,	,	PUNCT
fuelectenerg-7534	183	16	increased	increase	VERB
fuelectenerg-7534	183	17	volume	volume	NOUN
fuelectenerg-7534	183	18	and	and	CCONJ
fuelectenerg-7534	183	19	impairment	impairment	NOUN
fuelectenerg-7534	183	20	on	on	ADP
fuelectenerg-7534	183	21	performances	performance	NOUN
fuelectenerg-7534	183	22	of	of	ADP
fuelectenerg-7534	183	23	the	the	DET
fuelectenerg-7534	183	24	original	original	ADJ
fuelectenerg-7534	183	25	(	(	PUNCT
fuelectenerg-7534	183	26	naked	naked	ADJ
fuelectenerg-7534	183	27	)	)	PUNCT
fuelectenerg-7534	183	28	mems	mem	NOUN
fuelectenerg-7534	183	29	device	device	NOUN
fuelectenerg-7534	183	30	.	.	PUNCT
fuelectenerg-7534	184	1	the	the	DET
fuelectenerg-7534	184	2	two	two	NUM
fuelectenerg-7534	184	3	main	main	ADJ
fuelectenerg-7534	184	4	choices	choice	NOUN
fuelectenerg-7534	184	5	for	for	ADP
fuelectenerg-7534	184	6	packaging	packaging	NOUN
fuelectenerg-7534	184	7	at	at	ADP
fuelectenerg-7534	184	8	technology	technology	NOUN
fuelectenerg-7534	184	9	level	level	NOUN
fuelectenerg-7534	184	10	are	be	AUX
fuelectenerg-7534	184	11	chip	chip	NOUN
fuelectenerg-7534	184	12	-	-	PUNCT
fuelectenerg-7534	184	13	scale	scale	NOUN
fuelectenerg-7534	184	14	and	and	CCONJ
fuelectenerg-7534	184	15	wafer	wafer	NOUN
fuelectenerg-7534	184	16	-	-	PUNCT
fuelectenerg-7534	184	17	level	level	NOUN
fuelectenerg-7534	184	18	package	package	NOUN
fuelectenerg-7534	184	19	.	.	PUNCT
fuelectenerg-7534	185	1	the	the	DET
fuelectenerg-7534	185	2	latter	latter	ADJ
fuelectenerg-7534	185	3	is	be	AUX
fuelectenerg-7534	185	4	the	the	DET
fuelectenerg-7534	185	5	most	most	ADV
fuelectenerg-7534	185	6	widely	widely	ADV
fuelectenerg-7534	185	7	employed	employ	VERB
fuelectenerg-7534	185	8	for	for	ADP
fuelectenerg-7534	185	9	its	its	PRON
fuelectenerg-7534	185	10	lower	low	ADJ
fuelectenerg-7534	185	11	cost	cost	NOUN
fuelectenerg-7534	185	12	,	,	PUNCT
fuelectenerg-7534	185	13	efficiency	efficiency	NOUN
fuelectenerg-7534	185	14	in	in	ADP
fuelectenerg-7534	185	15	packaging	packaging	NOUN
fuelectenerg-7534	185	16	process	process	NOUN
fuelectenerg-7534	185	17	,	,	PUNCT
fuelectenerg-7534	185	18	reduced	reduce	VERB
fuelectenerg-7534	185	19	size	size	NOUN
fuelectenerg-7534	185	20	and	and	CCONJ
fuelectenerg-7534	185	21	decreased	decrease	VERB
fuelectenerg-7534	185	22	impairment	impairment	NOUN
fuelectenerg-7534	185	23	of	of	ADP
fuelectenerg-7534	185	24	performances	performance	NOUN
fuelectenerg-7534	185	25	.	.	PUNCT
fuelectenerg-7534	186	1	such	such	DET
fuelectenerg-7534	186	2	a	a	DET
fuelectenerg-7534	186	3	technique	technique	NOUN
fuelectenerg-7534	186	4	can	can	AUX
fuelectenerg-7534	186	5	rely	rely	VERB
fuelectenerg-7534	186	6	on	on	ADP
fuelectenerg-7534	186	7	two	two	NUM
fuelectenerg-7534	186	8	fundamental	fundamental	ADJ
fuelectenerg-7534	186	9	approaches	approach	NOUN
fuelectenerg-7534	186	10	:	:	PUNCT
fuelectenerg-7534	186	11	application	application	NOUN
fuelectenerg-7534	186	12	of	of	ADP
fuelectenerg-7534	186	13	a	a	DET
fuelectenerg-7534	186	14	cap	cap	NOUN
fuelectenerg-7534	186	15	and	and	CCONJ
fuelectenerg-7534	186	16	thin	thin	ADJ
fuelectenerg-7534	186	17	-	-	PUNCT
fuelectenerg-7534	186	18	film	film	NOUN
fuelectenerg-7534	186	19	packaging	packaging	NOUN
fuelectenerg-7534	186	20	.	.	PUNCT
fuelectenerg-7534	187	1	the	the	DET
fuelectenerg-7534	187	2	former	former	ADJ
fuelectenerg-7534	187	3	approach	approach	NOUN
fuelectenerg-7534	187	4	adopts	adopt	VERB
fuelectenerg-7534	187	5	silicon	silicon	NOUN
fuelectenerg-7534	187	6	-	-	PUNCT
fuelectenerg-7534	187	7	based	base	VERB
fuelectenerg-7534	187	8	materials	material	NOUN
fuelectenerg-7534	187	9	as	as	ADP
fuelectenerg-7534	187	10	a	a	DET
fuelectenerg-7534	187	11	cap	cap	NOUN
fuelectenerg-7534	187	12	covering	cover	VERB
fuelectenerg-7534	187	13	the	the	DET
fuelectenerg-7534	187	14	device	device	NOUN
fuelectenerg-7534	187	15	,	,	PUNCT
fuelectenerg-7534	187	16	as	as	SCONJ
fuelectenerg-7534	187	17	depicted	depict	VERB
fuelectenerg-7534	187	18	in	in	ADP
fuelectenerg-7534	187	19	figure	figure	NOUN
fuelectenerg-7534	187	20	3a	3a	NUM
fuelectenerg-7534	187	21	.	.	PUNCT
fuelectenerg-7534	188	1	typical	typical	ADJ
fuelectenerg-7534	188	2	materials	material	NOUN
fuelectenerg-7534	188	3	for	for	ADP
fuelectenerg-7534	188	4	the	the	DET
fuelectenerg-7534	188	5	realization	realization	NOUN
fuelectenerg-7534	188	6	of	of	ADP
fuelectenerg-7534	188	7	the	the	DET
fuelectenerg-7534	188	8	cap	cap	NOUN
fuelectenerg-7534	188	9	are	be	AUX
fuelectenerg-7534	188	10	represented	represent	VERB
fuelectenerg-7534	188	11	by	by	ADP
fuelectenerg-7534	188	12	benzocyclobutene	benzocyclobutene	NOUN
fuelectenerg-7534	188	13	(	(	PUNCT
fuelectenerg-7534	188	14	bcb	bcb	PROPN
fuelectenerg-7534	188	15	)	)	PUNCT
fuelectenerg-7534	188	16	,	,	PUNCT
fuelectenerg-7534	188	17	co	co	VERB
fuelectenerg-7534	188	18	-	-	VERB
fuelectenerg-7534	188	19	fired	fire	VERB
fuelectenerg-7534	188	20	ceramic	ceramic	ADJ
fuelectenerg-7534	188	21	(	(	PUNCT
fuelectenerg-7534	188	22	ltcc	ltcc	ADJ
fuelectenerg-7534	188	23	)	)	PUNCT
fuelectenerg-7534	188	24	,	,	PUNCT
fuelectenerg-7534	188	25	silicon	silicon	NOUN
fuelectenerg-7534	188	26	(	(	PUNCT
fuelectenerg-7534	188	27	si	si	NOUN
fuelectenerg-7534	188	28	)	)	PUNCT
fuelectenerg-7534	188	29	,	,	PUNCT
fuelectenerg-7534	188	30	and	and	CCONJ
fuelectenerg-7534	188	31	quartz	quartz	NOUN
fuelectenerg-7534	188	32	(	(	PUNCT
fuelectenerg-7534	188	33	sio2	sio2	PROPN
fuelectenerg-7534	188	34	)	)	PUNCT
fuelectenerg-7534	188	35	.	.	PUNCT
fuelectenerg-7534	189	1	depending	depend	VERB
fuelectenerg-7534	189	2	on	on	ADP
fuelectenerg-7534	189	3	the	the	DET
fuelectenerg-7534	189	4	presence	presence	NOUN
fuelectenerg-7534	189	5	(	(	PUNCT
fuelectenerg-7534	189	6	or	or	CCONJ
fuelectenerg-7534	189	7	absence	absence	NOUN
fuelectenerg-7534	189	8	)	)	PUNCT
fuelectenerg-7534	189	9	of	of	ADP
fuelectenerg-7534	189	10	a	a	DET
fuelectenerg-7534	189	11	sealing	sealing	NOUN
fuelectenerg-7534	189	12	material	material	NOUN
fuelectenerg-7534	189	13	,	,	PUNCT
fuelectenerg-7534	189	14	interposed	interpose	VERB
fuelectenerg-7534	189	15	between	between	ADP
fuelectenerg-7534	189	16	the	the	DET
fuelectenerg-7534	189	17	cap	cap	NOUN
fuelectenerg-7534	189	18	and	and	CCONJ
fuelectenerg-7534	189	19	the	the	DET
fuelectenerg-7534	189	20	device	device	NOUN
fuelectenerg-7534	189	21	wafer	wafer	NOUN
fuelectenerg-7534	189	22	,	,	PUNCT
fuelectenerg-7534	189	23	intermediate	intermediate	ADJ
fuelectenerg-7534	189	24	bonding	bonding	NOUN
fuelectenerg-7534	189	25	(	(	PUNCT
fuelectenerg-7534	189	26	or	or	CCONJ
fuelectenerg-7534	189	27	direct	direct	ADJ
fuelectenerg-7534	189	28	bonding	bonding	NOUN
fuelectenerg-7534	189	29	)	)	PUNCT
fuelectenerg-7534	189	30	techniques	technique	NOUN
fuelectenerg-7534	189	31	are	be	AUX
fuelectenerg-7534	189	32	employed	employ	VERB
fuelectenerg-7534	189	33	to	to	PART
fuelectenerg-7534	189	34	seal	seal	VERB
fuelectenerg-7534	189	35	the	the	DET
fuelectenerg-7534	189	36	cap	cap	NOUN
fuelectenerg-7534	189	37	.	.	PUNCT
fuelectenerg-7534	190	1	intermediate	intermediate	ADJ
fuelectenerg-7534	190	2	bonding	bonding	NOUN
fuelectenerg-7534	190	3	is	be	AUX
fuelectenerg-7534	190	4	generally	generally	ADV
fuelectenerg-7534	190	5	more	more	ADV
fuelectenerg-7534	190	6	convenient	convenient	ADJ
fuelectenerg-7534	190	7	because	because	SCONJ
fuelectenerg-7534	190	8	of	of	ADP
fuelectenerg-7534	190	9	its	its	PRON
fuelectenerg-7534	190	10	relatively	relatively	ADV
fuelectenerg-7534	190	11	low	low	ADJ
fuelectenerg-7534	190	12	temperatures	temperature	NOUN
fuelectenerg-7534	190	13	(	(	PUNCT
fuelectenerg-7534	190	14	(	(	PUNCT
fuelectenerg-7534	190	15	200	200	NUM
fuelectenerg-7534	190	16	-	-	PUNCT
fuelectenerg-7534	190	17	400)	400)	NUM
fuelectenerg-7534	190	18	°	°	NOUN
fuelectenerg-7534	190	19	c	c	NOUN
fuelectenerg-7534	190	20	)	)	PUNCT
fuelectenerg-7534	190	21	,	,	PUNCT
fuelectenerg-7534	190	22	since	since	SCONJ
fuelectenerg-7534	190	23	direct	direct	ADJ
fuelectenerg-7534	190	24	bonding	bonding	NOUN
fuelectenerg-7534	190	25	techniques	technique	NOUN
fuelectenerg-7534	190	26	may	may	AUX
fuelectenerg-7534	190	27	require	require	VERB
fuelectenerg-7534	190	28	up	up	ADP
fuelectenerg-7534	190	29	to	to	PART
fuelectenerg-7534	190	30	1000	1000	NUM
fuelectenerg-7534	190	31	°	°	SYM
fuelectenerg-7534	190	32	c	c	NOUN
fuelectenerg-7534	190	33	(	(	PUNCT
fuelectenerg-7534	190	34	in	in	ADP
fuelectenerg-7534	190	35	case	case	NOUN
fuelectenerg-7534	190	36	of	of	ADP
fuelectenerg-7534	190	37	fusion	fusion	NOUN
fuelectenerg-7534	190	38	bonding	bonding	NOUN
fuelectenerg-7534	190	39	,	,	PUNCT
fuelectenerg-7534	190	40	as	as	SCONJ
fuelectenerg-7534	190	41	reported	report	VERB
fuelectenerg-7534	190	42	in	in	ADP
fuelectenerg-7534	190	43	[	[	X
fuelectenerg-7534	190	44	46	46	NUM
fuelectenerg-7534	190	45	]	]	PUNCT
fuelectenerg-7534	190	46	)	)	PUNCT
fuelectenerg-7534	190	47	.	.	PUNCT
fuelectenerg-7534	191	1	the	the	DET
fuelectenerg-7534	191	2	cap	cap	NOUN
fuelectenerg-7534	191	3	is	be	AUX
fuelectenerg-7534	191	4	placed	place	VERB
fuelectenerg-7534	191	5	on	on	ADP
fuelectenerg-7534	191	6	mems	mems	ADJ
fuelectenerg-7534	191	7	device	device	NOUN
fuelectenerg-7534	191	8	by	by	ADP
fuelectenerg-7534	191	9	optical	optical	ADJ
fuelectenerg-7534	191	10	alignment	alignment	NOUN
fuelectenerg-7534	191	11	and	and	CCONJ
fuelectenerg-7534	191	12	typically	typically	ADV
fuelectenerg-7534	191	13	sealed	seal	VERB
fuelectenerg-7534	191	14	by	by	ADP
fuelectenerg-7534	191	15	gold	gold	NOUN
fuelectenerg-7534	191	16	(	(	PUNCT
fuelectenerg-7534	191	17	au	au	PROPN
fuelectenerg-7534	191	18	)	)	PUNCT
fuelectenerg-7534	191	19	,	,	PUNCT
fuelectenerg-7534	191	20	sio2	sio2	PROPN
fuelectenerg-7534	191	21	,	,	PUNCT
fuelectenerg-7534	191	22	bcb	bcb	PROPN
fuelectenerg-7534	191	23	,	,	PUNCT
fuelectenerg-7534	191	24	or	or	CCONJ
fuelectenerg-7534	191	25	su-8	su-8	ADV
fuelectenerg-7534	191	26	.	.	PUNCT
fuelectenerg-7534	192	1	(	(	PUNCT
fuelectenerg-7534	192	2	a	a	X
fuelectenerg-7534	192	3	)	)	PUNCT
fuelectenerg-7534	192	4	(	(	PUNCT
fuelectenerg-7534	192	5	b	b	X
fuelectenerg-7534	192	6	)	)	PUNCT
fuelectenerg-7534	192	7	fig	fig	NOUN
fuelectenerg-7534	192	8	.	.	PUNCT
fuelectenerg-7534	193	1	3	3	NUM
fuelectenerg-7534	193	2	(	(	PUNCT
fuelectenerg-7534	193	3	a	a	NOUN
fuelectenerg-7534	193	4	)	)	PUNCT
fuelectenerg-7534	193	5	general	general	ADJ
fuelectenerg-7534	193	6	practical	practical	ADJ
fuelectenerg-7534	193	7	implementation	implementation	NOUN
fuelectenerg-7534	193	8	of	of	ADP
fuelectenerg-7534	193	9	capping	capping	NOUN
fuelectenerg-7534	193	10	reported	report	VERB
fuelectenerg-7534	193	11	in	in	ADP
fuelectenerg-7534	193	12	[	[	X
fuelectenerg-7534	193	13	47	47	NUM
fuelectenerg-7534	193	14	]	]	PUNCT
fuelectenerg-7534	193	15	,	,	PUNCT
fuelectenerg-7534	193	16	(	(	PUNCT
fuelectenerg-7534	193	17	b	b	NOUN
fuelectenerg-7534	193	18	)	)	PUNCT
fuelectenerg-7534	193	19	detail	detail	NOUN
fuelectenerg-7534	193	20	of	of	ADP
fuelectenerg-7534	193	21	quartz	quartz	NOUN
fuelectenerg-7534	193	22	capped	cap	VERB
fuelectenerg-7534	193	23	sp4	sp4	PROPN
fuelectenerg-7534	193	24	t	t	PROPN
fuelectenerg-7534	193	25	(	(	PUNCT
fuelectenerg-7534	193	26	single	single	ADJ
fuelectenerg-7534	193	27	pole	pole	NOUN
fuelectenerg-7534	193	28	4	4	NUM
fuelectenerg-7534	193	29	throw	throw	NOUN
fuelectenerg-7534	193	30	)	)	PUNCT
fuelectenerg-7534	193	31	switch	switch	NOUN
fuelectenerg-7534	193	32	,	,	PUNCT
fuelectenerg-7534	193	33	reported	report	VERB
fuelectenerg-7534	193	34	in	in	ADP
fuelectenerg-7534	193	35	[	[	X
fuelectenerg-7534	193	36	48	48	NUM
fuelectenerg-7534	193	37	]	]	PUNCT
fuelectenerg-7534	193	38	.	.	PUNCT
fuelectenerg-7534	194	1	a	a	DET
fuelectenerg-7534	194	2	comprehensive	comprehensive	ADJ
fuelectenerg-7534	194	3	overview	overview	NOUN
fuelectenerg-7534	194	4	of	of	ADP
fuelectenerg-7534	194	5	recent	recent	ADJ
fuelectenerg-7534	194	6	developments	development	NOUN
fuelectenerg-7534	194	7	in	in	ADP
fuelectenerg-7534	194	8	rf	rf	ADJ
fuelectenerg-7534	194	9	-	-	PUNCT
fuelectenerg-7534	194	10	mems	mems	ADJ
fuelectenerg-7534	194	11	technology	technology	NOUN
fuelectenerg-7534	194	12	343	343	NUM
fuelectenerg-7534	194	13	examples	example	NOUN
fuelectenerg-7534	194	14	are	be	AUX
fuelectenerg-7534	194	15	reported	report	VERB
fuelectenerg-7534	194	16	in	in	ADP
fuelectenerg-7534	194	17	[	[	X
fuelectenerg-7534	194	18	48][49][50][51	48][49][50][51	NOUN
fuelectenerg-7534	194	19	]	]	X
fuelectenerg-7534	194	20	showing	show	VERB
fuelectenerg-7534	194	21	switches	switch	NOUN
fuelectenerg-7534	194	22	encapsulated	encapsulate	VERB
fuelectenerg-7534	194	23	by	by	ADP
fuelectenerg-7534	194	24	intermediate	intermediate	ADJ
fuelectenerg-7534	194	25	bonding	bonding	NOUN
fuelectenerg-7534	194	26	techniques	technique	NOUN
fuelectenerg-7534	194	27	at	at	ADP
fuelectenerg-7534	194	28	temperatures	temperature	NOUN
fuelectenerg-7534	194	29	in	in	ADP
fuelectenerg-7534	194	30	the	the	DET
fuelectenerg-7534	194	31	range	range	NOUN
fuelectenerg-7534	194	32	(	(	PUNCT
fuelectenerg-7534	194	33	200	200	NUM
fuelectenerg-7534	194	34	-	-	PUNCT
fuelectenerg-7534	194	35	250)	250)	NUM
fuelectenerg-7534	194	36	°	°	PROPN
fuelectenerg-7534	194	37	c	c	NOUN
fuelectenerg-7534	194	38	,	,	PUNCT
fuelectenerg-7534	194	39	which	which	PRON
fuelectenerg-7534	194	40	have	have	AUX
fuelectenerg-7534	194	41	not	not	PART
fuelectenerg-7534	194	42	been	be	AUX
fuelectenerg-7534	194	43	particularly	particularly	ADV
fuelectenerg-7534	194	44	impaired	impair	VERB
fuelectenerg-7534	194	45	by	by	ADP
fuelectenerg-7534	194	46	packaging	packaging	NOUN
fuelectenerg-7534	194	47	procedures	procedure	NOUN
fuelectenerg-7534	194	48	.	.	PUNCT
fuelectenerg-7534	195	1	in	in	ADP
fuelectenerg-7534	195	2	particular	particular	ADJ
fuelectenerg-7534	195	3	[	[	PUNCT
fuelectenerg-7534	195	4	48	48	NUM
fuelectenerg-7534	195	5	]	]	PUNCT
fuelectenerg-7534	195	6	presents	present	VERB
fuelectenerg-7534	195	7	various	various	ADJ
fuelectenerg-7534	195	8	devices	device	NOUN
fuelectenerg-7534	195	9	,	,	PUNCT
fuelectenerg-7534	195	10	including	include	VERB
fuelectenerg-7534	195	11	the	the	DET
fuelectenerg-7534	195	12	sp4	sp4	NOUN
fuelectenerg-7534	195	13	t	t	PROPN
fuelectenerg-7534	195	14	switch	switch	NOUN
fuelectenerg-7534	195	15	represented	represent	VERB
fuelectenerg-7534	195	16	in	in	ADP
fuelectenerg-7534	195	17	figure	figure	NOUN
fuelectenerg-7534	195	18	3b	3b	NUM
fuelectenerg-7534	195	19	,	,	PUNCT
fuelectenerg-7534	195	20	protected	protect	VERB
fuelectenerg-7534	195	21	by	by	ADP
fuelectenerg-7534	195	22	a	a	DET
fuelectenerg-7534	195	23	quartz	quartz	NOUN
fuelectenerg-7534	195	24	cap	cap	NOUN
fuelectenerg-7534	195	25	fixed	fix	VERB
fuelectenerg-7534	195	26	on	on	ADP
fuelectenerg-7534	195	27	substrate	substrate	NOUN
fuelectenerg-7534	195	28	by	by	ADP
fuelectenerg-7534	195	29	epoxy	epoxy	NOUN
fuelectenerg-7534	195	30	polymer	polymer	NOUN
fuelectenerg-7534	195	31	su-8	su-8	NOUN
fuelectenerg-7534	195	32	.	.	PUNCT
fuelectenerg-7534	196	1	depending	depend	VERB
fuelectenerg-7534	196	2	on	on	ADP
fuelectenerg-7534	196	3	the	the	DET
fuelectenerg-7534	196	4	substrate	substrate	NOUN
fuelectenerg-7534	196	5	flatness	flatness	NOUN
fuelectenerg-7534	196	6	,	,	PUNCT
fuelectenerg-7534	196	7	two	two	NUM
fuelectenerg-7534	196	8	fabrication	fabrication	NOUN
fuelectenerg-7534	196	9	methods	method	NOUN
fuelectenerg-7534	196	10	are	be	AUX
fuelectenerg-7534	196	11	proposed	propose	VERB
fuelectenerg-7534	196	12	:	:	PUNCT
fuelectenerg-7534	196	13	one	one	NUM
fuelectenerg-7534	196	14	for	for	ADP
fuelectenerg-7534	196	15	substrates	substrate	NOUN
fuelectenerg-7534	196	16	with	with	ADP
fuelectenerg-7534	196	17	cavities	cavity	NOUN
fuelectenerg-7534	196	18	and	and	CCONJ
fuelectenerg-7534	196	19	holes	hole	NOUN
fuelectenerg-7534	196	20	,	,	PUNCT
fuelectenerg-7534	196	21	and	and	CCONJ
fuelectenerg-7534	196	22	one	one	NUM
fuelectenerg-7534	196	23	for	for	ADP
fuelectenerg-7534	196	24	flat	flat	ADJ
fuelectenerg-7534	196	25	substrates	substrate	NOUN
fuelectenerg-7534	196	26	.	.	PUNCT
fuelectenerg-7534	197	1	experimental	experimental	ADJ
fuelectenerg-7534	197	2	results	result	NOUN
fuelectenerg-7534	197	3	of	of	ADP
fuelectenerg-7534	197	4	electrical	electrical	ADJ
fuelectenerg-7534	197	5	parameters	parameter	NOUN
fuelectenerg-7534	197	6	show	show	VERB
fuelectenerg-7534	197	7	minimal	minimal	ADJ
fuelectenerg-7534	197	8	degradation	degradation	NOUN
fuelectenerg-7534	197	9	of	of	ADP
fuelectenerg-7534	197	10	insertion	insertion	NOUN
fuelectenerg-7534	197	11	loss	loss	NOUN
fuelectenerg-7534	197	12	(	(	PUNCT
fuelectenerg-7534	197	13	an	an	DET
fuelectenerg-7534	197	14	increase	increase	NOUN
fuelectenerg-7534	197	15	of	of	ADP
fuelectenerg-7534	197	16	0.1	0.1	NUM
fuelectenerg-7534	197	17	-	-	PUNCT
fuelectenerg-7534	197	18	0.2	0.2	NUM
fuelectenerg-7534	197	19	db	db	NOUN
fuelectenerg-7534	197	20	)	)	PUNCT
fuelectenerg-7534	197	21	up	up	ADP
fuelectenerg-7534	197	22	to	to	PART
fuelectenerg-7534	197	23	30	30	NUM
fuelectenerg-7534	197	24	ghz	ghz	NOUN
fuelectenerg-7534	197	25	,	,	PUNCT
fuelectenerg-7534	197	26	providing	provide	VERB
fuelectenerg-7534	197	27	a	a	DET
fuelectenerg-7534	197	28	capped	cap	VERB
fuelectenerg-7534	197	29	device	device	NOUN
fuelectenerg-7534	197	30	not	not	PART
fuelectenerg-7534	197	31	exceeding	exceed	VERB
fuelectenerg-7534	197	32	-0.7	-0.7	PROPN
fuelectenerg-7534	197	33	db	db	PROPN
fuelectenerg-7534	197	34	up	up	ADP
fuelectenerg-7534	197	35	to	to	PART
fuelectenerg-7534	197	36	40	40	NUM
fuelectenerg-7534	197	37	ghz	ghz	NOUN
fuelectenerg-7534	197	38	.	.	PUNCT
fuelectenerg-7534	198	1	return	return	NOUN
fuelectenerg-7534	198	2	loss	loss	NOUN
fuelectenerg-7534	198	3	is	be	AUX
fuelectenerg-7534	198	4	slightly	slightly	ADV
fuelectenerg-7534	198	5	impaired	impair	VERB
fuelectenerg-7534	198	6	by	by	ADP
fuelectenerg-7534	198	7	the	the	DET
fuelectenerg-7534	198	8	impedance	impedance	NOUN
fuelectenerg-7534	198	9	mismatch	mismatch	NOUN
fuelectenerg-7534	198	10	introduced	introduce	VERB
fuelectenerg-7534	198	11	by	by	ADP
fuelectenerg-7534	198	12	the	the	DET
fuelectenerg-7534	198	13	cap	cap	NOUN
fuelectenerg-7534	198	14	,	,	PUNCT
fuelectenerg-7534	198	15	reaching	reach	VERB
fuelectenerg-7534	198	16	values	value	NOUN
fuelectenerg-7534	198	17	up	up	ADP
fuelectenerg-7534	198	18	to	to	PART
fuelectenerg-7534	198	19	10	10	NUM
fuelectenerg-7534	198	20	db	db	NOUN
fuelectenerg-7534	198	21	in	in	ADP
fuelectenerg-7534	198	22	the	the	DET
fuelectenerg-7534	198	23	range	range	NOUN
fuelectenerg-7534	198	24	up	up	ADP
fuelectenerg-7534	198	25	to	to	PART
fuelectenerg-7534	198	26	20	20	NUM
fuelectenerg-7534	198	27	ghz	ghz	NOUN
fuelectenerg-7534	198	28	.	.	PUNCT
fuelectenerg-7534	199	1	in	in	ADP
fuelectenerg-7534	199	2	the	the	DET
fuelectenerg-7534	199	3	remaining	remain	VERB
fuelectenerg-7534	199	4	portion	portion	NOUN
fuelectenerg-7534	199	5	of	of	ADP
fuelectenerg-7534	199	6	the	the	DET
fuelectenerg-7534	199	7	measured	measured	ADJ
fuelectenerg-7534	199	8	spectrum	spectrum	NOUN
fuelectenerg-7534	199	9	,	,	PUNCT
fuelectenerg-7534	199	10	the	the	DET
fuelectenerg-7534	199	11	return	return	NOUN
fuelectenerg-7534	199	12	loss	loss	NOUN
fuelectenerg-7534	199	13	of	of	ADP
fuelectenerg-7534	199	14	the	the	DET
fuelectenerg-7534	199	15	capped	cap	VERB
fuelectenerg-7534	199	16	device	device	NOUN
fuelectenerg-7534	199	17	complies	comply	VERB
fuelectenerg-7534	199	18	with	with	ADP
fuelectenerg-7534	199	19	the	the	DET
fuelectenerg-7534	199	20	one	one	NUM
fuelectenerg-7534	199	21	of	of	ADP
fuelectenerg-7534	199	22	uncapped	uncapped	ADJ
fuelectenerg-7534	199	23	version	version	NOUN
fuelectenerg-7534	199	24	along	along	ADP
fuelectenerg-7534	199	25	the	the	DET
fuelectenerg-7534	199	26	measured	measured	ADJ
fuelectenerg-7534	199	27	range	range	NOUN
fuelectenerg-7534	199	28	.	.	PUNCT
fuelectenerg-7534	200	1	encapsulation	encapsulation	NOUN
fuelectenerg-7534	200	2	did	do	AUX
fuelectenerg-7534	200	3	not	not	PART
fuelectenerg-7534	200	4	drastically	drastically	ADV
fuelectenerg-7534	200	5	affect	affect	VERB
fuelectenerg-7534	200	6	electro	electro	ADJ
fuelectenerg-7534	200	7	-	-	PUNCT
fuelectenerg-7534	200	8	mechanical	mechanical	ADJ
fuelectenerg-7534	200	9	properties	property	NOUN
fuelectenerg-7534	200	10	.	.	PUNCT
fuelectenerg-7534	201	1	while	while	SCONJ
fuelectenerg-7534	201	2	for	for	ADP
fuelectenerg-7534	201	3	a	a	DET
fuelectenerg-7534	201	4	shunt	shunt	ADJ
fuelectenerg-7534	201	5	capacitive	capacitive	ADJ
fuelectenerg-7534	201	6	switch	switch	NOUN
fuelectenerg-7534	201	7	there	there	PRON
fuelectenerg-7534	201	8	was	be	VERB
fuelectenerg-7534	201	9	no	no	DET
fuelectenerg-7534	201	10	change	change	NOUN
fuelectenerg-7534	201	11	in	in	ADP
fuelectenerg-7534	201	12	capacitance	capacitance	NOUN
fuelectenerg-7534	201	13	and	and	CCONJ
fuelectenerg-7534	201	14	actuation	actuation	NOUN
fuelectenerg-7534	201	15	voltage	voltage	NOUN
fuelectenerg-7534	201	16	was	be	AUX
fuelectenerg-7534	201	17	just	just	ADV
fuelectenerg-7534	201	18	slightly	slightly	ADV
fuelectenerg-7534	201	19	increased	increase	VERB
fuelectenerg-7534	201	20	,	,	PUNCT
fuelectenerg-7534	201	21	a	a	DET
fuelectenerg-7534	201	22	measured	measure	VERB
fuelectenerg-7534	201	23	sp4	sp4	NOUN
fuelectenerg-7534	201	24	t	t	NOUN
fuelectenerg-7534	201	25	switch	switch	NOUN
fuelectenerg-7534	201	26	showed	show	VERB
fuelectenerg-7534	201	27	a	a	DET
fuelectenerg-7534	201	28	minimal	minimal	ADJ
fuelectenerg-7534	201	29	change	change	NOUN
fuelectenerg-7534	201	30	in	in	ADP
fuelectenerg-7534	201	31	series	series	NOUN
fuelectenerg-7534	201	32	resistance	resistance	NOUN
fuelectenerg-7534	201	33	and	and	CCONJ
fuelectenerg-7534	201	34	a	a	DET
fuelectenerg-7534	201	35	decrease	decrease	NOUN
fuelectenerg-7534	201	36	of	of	ADP
fuelectenerg-7534	201	37	actuation	actuation	NOUN
fuelectenerg-7534	201	38	voltage	voltage	NOUN
fuelectenerg-7534	201	39	.	.	PUNCT
fuelectenerg-7534	202	1	a	a	DET
fuelectenerg-7534	202	2	more	more	ADV
fuelectenerg-7534	202	3	recent	recent	ADJ
fuelectenerg-7534	202	4	contribution	contribution	NOUN
fuelectenerg-7534	202	5	comes	come	VERB
fuelectenerg-7534	202	6	from	from	ADP
fuelectenerg-7534	202	7	[	[	X
fuelectenerg-7534	202	8	52	52	NUM
fuelectenerg-7534	202	9	]	]	PUNCT
fuelectenerg-7534	202	10	,	,	PUNCT
fuelectenerg-7534	202	11	in	in	ADP
fuelectenerg-7534	202	12	which	which	PRON
fuelectenerg-7534	202	13	a	a	DET
fuelectenerg-7534	202	14	silicon	silicon	NOUN
fuelectenerg-7534	202	15	cap	cap	NOUN
fuelectenerg-7534	202	16	bonded	bond	VERB
fuelectenerg-7534	202	17	by	by	ADP
fuelectenerg-7534	202	18	spincoated	spincoate	VERB
fuelectenerg-7534	202	19	bcb	bcb	PROPN
fuelectenerg-7534	202	20	is	be	AUX
fuelectenerg-7534	202	21	accurately	accurately	ADV
fuelectenerg-7534	202	22	modeled	model	VERB
fuelectenerg-7534	202	23	and	and	CCONJ
fuelectenerg-7534	202	24	added	add	VERB
fuelectenerg-7534	202	25	to	to	ADP
fuelectenerg-7534	202	26	different	different	ADJ
fuelectenerg-7534	202	27	switch	switch	NOUN
fuelectenerg-7534	202	28	devices	device	NOUN
fuelectenerg-7534	202	29	.	.	PUNCT
fuelectenerg-7534	203	1	the	the	DET
fuelectenerg-7534	203	2	different	different	ADJ
fuelectenerg-7534	203	3	mounted	mount	VERB
fuelectenerg-7534	203	4	caps	cap	NOUN
fuelectenerg-7534	203	5	have	have	AUX
fuelectenerg-7534	203	6	been	be	AUX
fuelectenerg-7534	203	7	tested	test	VERB
fuelectenerg-7534	203	8	in	in	ADP
fuelectenerg-7534	203	9	terms	term	NOUN
fuelectenerg-7534	203	10	of	of	ADP
fuelectenerg-7534	203	11	resistance	resistance	NOUN
fuelectenerg-7534	203	12	to	to	ADP
fuelectenerg-7534	203	13	shear	shear	NOUN
fuelectenerg-7534	203	14	stress	stress	NOUN
fuelectenerg-7534	203	15	,	,	PUNCT
fuelectenerg-7534	203	16	by	by	ADP
fuelectenerg-7534	203	17	applying	apply	VERB
fuelectenerg-7534	203	18	horizontal	horizontal	ADJ
fuelectenerg-7534	203	19	force	force	NOUN
fuelectenerg-7534	203	20	only	only	ADV
fuelectenerg-7534	203	21	to	to	ADP
fuelectenerg-7534	203	22	the	the	DET
fuelectenerg-7534	203	23	cap	cap	NOUN
fuelectenerg-7534	203	24	while	while	SCONJ
fuelectenerg-7534	203	25	keeping	keep	VERB
fuelectenerg-7534	203	26	the	the	DET
fuelectenerg-7534	203	27	wafer	wafer	NOUN
fuelectenerg-7534	203	28	fixed	fix	VERB
fuelectenerg-7534	203	29	.	.	PUNCT
fuelectenerg-7534	204	1	packages	package	NOUN
fuelectenerg-7534	204	2	exhibited	exhibit	VERB
fuelectenerg-7534	204	3	a	a	DET
fuelectenerg-7534	204	4	high	high	ADJ
fuelectenerg-7534	204	5	average	average	ADJ
fuelectenerg-7534	204	6	break	break	NOUN
fuelectenerg-7534	204	7	force	force	NOUN
fuelectenerg-7534	204	8	(	(	PUNCT
fuelectenerg-7534	204	9	force	force	NOUN
fuelectenerg-7534	204	10	needed	need	VERB
fuelectenerg-7534	204	11	to	to	PART
fuelectenerg-7534	204	12	detach	detach	VERB
fuelectenerg-7534	204	13	the	the	DET
fuelectenerg-7534	204	14	cap	cap	NOUN
fuelectenerg-7534	204	15	)	)	PUNCT
fuelectenerg-7534	204	16	of	of	ADP
fuelectenerg-7534	204	17	21	21	NUM
fuelectenerg-7534	204	18	n.	n.	NOUN
fuelectenerg-7534	204	19	the	the	DET
fuelectenerg-7534	204	20	increase	increase	NOUN
fuelectenerg-7534	204	21	of	of	ADP
fuelectenerg-7534	204	22	insertion	insertion	NOUN
fuelectenerg-7534	204	23	loss	loss	NOUN
fuelectenerg-7534	204	24	due	due	ADP
fuelectenerg-7534	204	25	to	to	ADP
fuelectenerg-7534	204	26	the	the	DET
fuelectenerg-7534	204	27	proposed	propose	VERB
fuelectenerg-7534	204	28	package	package	NOUN
fuelectenerg-7534	204	29	is	be	AUX
fuelectenerg-7534	204	30	around	around	ADV
fuelectenerg-7534	204	31	0.2	0.2	NUM
fuelectenerg-7534	204	32	db	db	PROPN
fuelectenerg-7534	204	33	,	,	PUNCT
fuelectenerg-7534	204	34	with	with	ADP
fuelectenerg-7534	204	35	an	an	DET
fuelectenerg-7534	204	36	average	average	ADJ
fuelectenerg-7534	204	37	increase	increase	NOUN
fuelectenerg-7534	204	38	of	of	ADP
fuelectenerg-7534	204	39	actuation	actuation	NOUN
fuelectenerg-7534	204	40	voltage	voltage	NOUN
fuelectenerg-7534	204	41	of	of	ADP
fuelectenerg-7534	204	42	4.2	4.2	NUM
fuelectenerg-7534	204	43	v	v	NOUN
fuelectenerg-7534	204	44	among	among	ADP
fuelectenerg-7534	204	45	the	the	DET
fuelectenerg-7534	204	46	nine	nine	NUM
fuelectenerg-7534	204	47	measured	measure	VERB
fuelectenerg-7534	204	48	switches	switch	NOUN
fuelectenerg-7534	204	49	.	.	PUNCT
fuelectenerg-7534	205	1	all	all	DET
fuelectenerg-7534	205	2	capped	cap	VERB
fuelectenerg-7534	205	3	switches	switch	NOUN
fuelectenerg-7534	205	4	show	show	VERB
fuelectenerg-7534	205	5	remarkably	remarkably	ADV
fuelectenerg-7534	205	6	low	low	ADJ
fuelectenerg-7534	205	7	insertion	insertion	NOUN
fuelectenerg-7534	205	8	loss	loss	NOUN
fuelectenerg-7534	205	9	(	(	PUNCT
fuelectenerg-7534	205	10	<	<	X
fuelectenerg-7534	205	11	-0.44	-0.44	NUM
fuelectenerg-7534	205	12	db	db	PROPN
fuelectenerg-7534	205	13	)	)	PUNCT
fuelectenerg-7534	205	14	,	,	PUNCT
fuelectenerg-7534	205	15	and	and	CCONJ
fuelectenerg-7534	205	16	reasonable	reasonable	ADJ
fuelectenerg-7534	205	17	return	return	NOUN
fuelectenerg-7534	205	18	loss	loss	NOUN
fuelectenerg-7534	205	19	(	(	PUNCT
fuelectenerg-7534	205	20	<	<	X
fuelectenerg-7534	205	21	-20.9	-20.9	NOUN
fuelectenerg-7534	205	22	db	db	NOUN
fuelectenerg-7534	205	23	)	)	PUNCT
fuelectenerg-7534	205	24	all	all	ADV
fuelectenerg-7534	205	25	over	over	ADP
fuelectenerg-7534	205	26	the	the	DET
fuelectenerg-7534	205	27	40	40	NUM
fuelectenerg-7534	205	28	ghz	ghz	NOUN
fuelectenerg-7534	205	29	measured	measure	VERB
fuelectenerg-7534	205	30	interval	interval	NOUN
fuelectenerg-7534	205	31	,	,	PUNCT
fuelectenerg-7534	205	32	operating	operate	VERB
fuelectenerg-7534	205	33	for	for	ADP
fuelectenerg-7534	205	34	more	more	ADJ
fuelectenerg-7534	205	35	than	than	ADP
fuelectenerg-7534	205	36	10.2	10.2	NUM
fuelectenerg-7534	205	37	billion	billion	NUM
fuelectenerg-7534	205	38	cycles	cycle	NOUN
fuelectenerg-7534	205	39	.	.	PUNCT
fuelectenerg-7534	206	1	the	the	DET
fuelectenerg-7534	206	2	approach	approach	NOUN
fuelectenerg-7534	206	3	of	of	ADP
fuelectenerg-7534	206	4	thin	thin	ADJ
fuelectenerg-7534	206	5	film	film	NOUN
fuelectenerg-7534	206	6	packaging	packaging	NOUN
fuelectenerg-7534	206	7	generally	generally	ADV
fuelectenerg-7534	206	8	involves	involve	VERB
fuelectenerg-7534	206	9	a	a	DET
fuelectenerg-7534	206	10	sacrificial	sacrificial	ADJ
fuelectenerg-7534	206	11	layer	layer	NOUN
fuelectenerg-7534	206	12	placed	place	VERB
fuelectenerg-7534	206	13	on	on	ADP
fuelectenerg-7534	206	14	movable	movable	ADJ
fuelectenerg-7534	206	15	parts	part	NOUN
fuelectenerg-7534	206	16	of	of	ADP
fuelectenerg-7534	206	17	a	a	DET
fuelectenerg-7534	206	18	mems	mem	NOUN
fuelectenerg-7534	206	19	device	device	NOUN
fuelectenerg-7534	206	20	,	,	PUNCT
fuelectenerg-7534	206	21	covered	cover	VERB
fuelectenerg-7534	206	22	with	with	ADP
fuelectenerg-7534	206	23	a	a	DET
fuelectenerg-7534	206	24	thin	thin	ADJ
fuelectenerg-7534	206	25	film	film	NOUN
fuelectenerg-7534	206	26	layer	layer	NOUN
fuelectenerg-7534	206	27	.	.	PUNCT
fuelectenerg-7534	207	1	such	such	ADJ
fuelectenerg-7534	207	2	layer	layer	NOUN
fuelectenerg-7534	207	3	will	will	AUX
fuelectenerg-7534	207	4	be	be	AUX
fuelectenerg-7534	207	5	perforated	perforate	VERB
fuelectenerg-7534	207	6	to	to	PART
fuelectenerg-7534	207	7	remove	remove	VERB
fuelectenerg-7534	207	8	the	the	DET
fuelectenerg-7534	207	9	sacrificial	sacrificial	ADJ
fuelectenerg-7534	207	10	layer	layer	NOUN
fuelectenerg-7534	207	11	,	,	PUNCT
fuelectenerg-7534	207	12	and	and	CCONJ
fuelectenerg-7534	207	13	then	then	ADV
fuelectenerg-7534	207	14	covered	cover	VERB
fuelectenerg-7534	207	15	with	with	ADP
fuelectenerg-7534	207	16	a	a	DET
fuelectenerg-7534	207	17	proper	proper	ADJ
fuelectenerg-7534	207	18	layer	layer	NOUN
fuelectenerg-7534	207	19	for	for	ADP
fuelectenerg-7534	207	20	final	final	ADJ
fuelectenerg-7534	207	21	sealing	sealing	NOUN
fuelectenerg-7534	207	22	,	,	PUNCT
fuelectenerg-7534	207	23	as	as	SCONJ
fuelectenerg-7534	207	24	shown	show	VERB
fuelectenerg-7534	207	25	in	in	ADP
fuelectenerg-7534	207	26	figure	figure	NOUN
fuelectenerg-7534	207	27	4a	4a	NOUN
fuelectenerg-7534	207	28	.	.	PUNCT
fuelectenerg-7534	208	1	in	in	ADP
fuelectenerg-7534	208	2	this	this	DET
fuelectenerg-7534	208	3	case	case	NOUN
fuelectenerg-7534	208	4	,	,	PUNCT
fuelectenerg-7534	208	5	gold	gold	NOUN
fuelectenerg-7534	208	6	[	[	X
fuelectenerg-7534	208	7	53	53	NUM
fuelectenerg-7534	208	8	]	]	PUNCT
fuelectenerg-7534	208	9	and	and	CCONJ
fuelectenerg-7534	208	10	silicon	silicon	NOUN
fuelectenerg-7534	208	11	-	-	PUNCT
fuelectenerg-7534	208	12	based	base	VERB
fuelectenerg-7534	208	13	materials	material	NOUN
fuelectenerg-7534	208	14	are	be	AUX
fuelectenerg-7534	208	15	commonly	commonly	ADV
fuelectenerg-7534	208	16	employed	employ	VERB
fuelectenerg-7534	208	17	solutions	solution	NOUN
fuelectenerg-7534	208	18	for	for	ADP
fuelectenerg-7534	208	19	the	the	DET
fuelectenerg-7534	208	20	thin	thin	ADJ
fuelectenerg-7534	208	21	film	film	NOUN
fuelectenerg-7534	208	22	,	,	PUNCT
fuelectenerg-7534	208	23	as	as	SCONJ
fuelectenerg-7534	208	24	observed	observe	VERB
fuelectenerg-7534	208	25	in	in	ADP
fuelectenerg-7534	208	26	[	[	X
fuelectenerg-7534	208	27	47	47	NUM
fuelectenerg-7534	208	28	]	]	PUNCT
fuelectenerg-7534	208	29	.	.	PUNCT
fuelectenerg-7534	209	1	such	such	ADJ
fuelectenerg-7534	209	2	materials	material	NOUN
fuelectenerg-7534	209	3	,	,	PUNCT
fuelectenerg-7534	209	4	besides	besides	SCONJ
fuelectenerg-7534	209	5	various	various	ADJ
fuelectenerg-7534	209	6	polymers	polymer	NOUN
fuelectenerg-7534	209	7	,	,	PUNCT
fuelectenerg-7534	209	8	can	can	AUX
fuelectenerg-7534	209	9	be	be	AUX
fuelectenerg-7534	209	10	adopted	adopt	VERB
fuelectenerg-7534	209	11	also	also	ADV
fuelectenerg-7534	209	12	as	as	ADP
fuelectenerg-7534	209	13	sealing	seal	VERB
fuelectenerg-7534	209	14	layer	layer	NOUN
fuelectenerg-7534	209	15	,	,	PUNCT
fuelectenerg-7534	209	16	generally	generally	ADV
fuelectenerg-7534	209	17	patterned	pattern	VERB
fuelectenerg-7534	209	18	by	by	ADP
fuelectenerg-7534	209	19	deposition	deposition	NOUN
fuelectenerg-7534	209	20	,	,	PUNCT
fuelectenerg-7534	209	21	evaporation	evaporation	NOUN
fuelectenerg-7534	209	22	and	and	CCONJ
fuelectenerg-7534	209	23	electroplating	electroplating	NOUN
fuelectenerg-7534	209	24	,	,	PUNCT
fuelectenerg-7534	209	25	spin	spin	NOUN
fuelectenerg-7534	209	26	-	-	PUNCT
fuelectenerg-7534	209	27	coating	coating	NOUN
fuelectenerg-7534	209	28	or	or	CCONJ
fuelectenerg-7534	209	29	plasma	plasma	NOUN
fuelectenerg-7534	209	30	-	-	PUNCT
fuelectenerg-7534	209	31	enhanced	enhance	VERB
fuelectenerg-7534	209	32	chemical	chemical	NOUN
fuelectenerg-7534	209	33	vapor	vapor	NOUN
fuelectenerg-7534	209	34	deposition	deposition	NOUN
fuelectenerg-7534	209	35	(	(	PUNCT
fuelectenerg-7534	209	36	pecvd	pecvd	NOUN
fuelectenerg-7534	209	37	)	)	PUNCT
fuelectenerg-7534	209	38	.	.	PUNCT
fuelectenerg-7534	210	1	examples	example	NOUN
fuelectenerg-7534	210	2	of	of	ADP
fuelectenerg-7534	210	3	such	such	ADJ
fuelectenerg-7534	210	4	technology	technology	NOUN
fuelectenerg-7534	210	5	are	be	AUX
fuelectenerg-7534	210	6	reported	report	VERB
fuelectenerg-7534	210	7	in	in	ADP
fuelectenerg-7534	210	8	[	[	X
fuelectenerg-7534	210	9	53][54][55][56	53][54][55][56	NUM
fuelectenerg-7534	210	10	]	]	PUNCT
fuelectenerg-7534	210	11	,	,	PUNCT
fuelectenerg-7534	210	12	showing	show	VERB
fuelectenerg-7534	210	13	encapsulated	encapsulate	VERB
fuelectenerg-7534	210	14	devices	device	NOUN
fuelectenerg-7534	210	15	still	still	ADV
fuelectenerg-7534	210	16	maintaining	maintain	VERB
fuelectenerg-7534	210	17	remarkable	remarkable	ADJ
fuelectenerg-7534	210	18	rf	rf	NOUN
fuelectenerg-7534	210	19	performances	performance	NOUN
fuelectenerg-7534	210	20	after	after	ADP
fuelectenerg-7534	210	21	the	the	DET
fuelectenerg-7534	210	22	packaging	packaging	NOUN
fuelectenerg-7534	210	23	process	process	NOUN
fuelectenerg-7534	210	24	.	.	PUNCT
fuelectenerg-7534	211	1	a	a	DET
fuelectenerg-7534	211	2	more	more	ADV
fuelectenerg-7534	211	3	recent	recent	ADJ
fuelectenerg-7534	211	4	proposal	proposal	NOUN
fuelectenerg-7534	211	5	comes	come	VERB
fuelectenerg-7534	211	6	from	from	ADP
fuelectenerg-7534	211	7	[	[	X
fuelectenerg-7534	211	8	57	57	NUM
fuelectenerg-7534	211	9	]	]	PUNCT
fuelectenerg-7534	211	10	,	,	PUNCT
fuelectenerg-7534	211	11	in	in	ADP
fuelectenerg-7534	211	12	which	which	PRON
fuelectenerg-7534	211	13	a	a	DET
fuelectenerg-7534	211	14	protective	protective	ADJ
fuelectenerg-7534	211	15	dielectric	dielectric	ADJ
fuelectenerg-7534	211	16	shell	shell	NOUN
fuelectenerg-7534	211	17	comprises	comprise	VERB
fuelectenerg-7534	211	18	an	an	DET
fuelectenerg-7534	211	19	electrode	electrode	NOUN
fuelectenerg-7534	211	20	,	,	PUNCT
fuelectenerg-7534	211	21	biased	bias	VERB
fuelectenerg-7534	211	22	to	to	PART
fuelectenerg-7534	211	23	ensure	ensure	VERB
fuelectenerg-7534	211	24	maximum	maximum	ADJ
fuelectenerg-7534	211	25	vertical	vertical	ADJ
fuelectenerg-7534	211	26	upward	upward	ADJ
fuelectenerg-7534	211	27	displacement	displacement	NOUN
fuelectenerg-7534	211	28	of	of	ADP
fuelectenerg-7534	211	29	the	the	DET
fuelectenerg-7534	211	30	movable	movable	ADJ
fuelectenerg-7534	211	31	membrane	membrane	NOUN
fuelectenerg-7534	211	32	of	of	ADP
fuelectenerg-7534	211	33	a	a	DET
fuelectenerg-7534	211	34	capacitive	capacitive	ADJ
fuelectenerg-7534	211	35	switch	switch	NOUN
fuelectenerg-7534	211	36	.	.	PUNCT
fuelectenerg-7534	212	1	this	this	PRON
fuelectenerg-7534	212	2	is	be	AUX
fuelectenerg-7534	212	3	beneficial	beneficial	ADJ
fuelectenerg-7534	212	4	both	both	CCONJ
fuelectenerg-7534	212	5	for	for	ADP
fuelectenerg-7534	212	6	the	the	DET
fuelectenerg-7534	212	7	capacitance	capacitance	NOUN
fuelectenerg-7534	212	8	ratio	ratio	NOUN
fuelectenerg-7534	212	9	and	and	CCONJ
fuelectenerg-7534	212	10	reliability	reliability	NOUN
fuelectenerg-7534	212	11	aspects	aspect	NOUN
fuelectenerg-7534	212	12	.	.	PUNCT
fuelectenerg-7534	213	1	possible	possible	ADJ
fuelectenerg-7534	213	2	configurations	configuration	NOUN
fuelectenerg-7534	213	3	of	of	ADP
fuelectenerg-7534	213	4	this	this	DET
fuelectenerg-7534	213	5	device	device	NOUN
fuelectenerg-7534	213	6	are	be	AUX
fuelectenerg-7534	213	7	represented	represent	VERB
fuelectenerg-7534	213	8	in	in	ADP
fuelectenerg-7534	213	9	figure	figure	NOUN
fuelectenerg-7534	213	10	4b	4b	PROPN
fuelectenerg-7534	213	11	.	.	PUNCT
fuelectenerg-7534	214	1	contact	contact	NOUN
fuelectenerg-7534	214	2	holes	hole	NOUN
fuelectenerg-7534	214	3	and	and	CCONJ
fuelectenerg-7534	214	4	release	release	NOUN
fuelectenerg-7534	214	5	channels	channel	NOUN
fuelectenerg-7534	214	6	are	be	AUX
fuelectenerg-7534	214	7	etched	etch	VERB
fuelectenerg-7534	214	8	on	on	ADP
fuelectenerg-7534	214	9	sides	side	NOUN
fuelectenerg-7534	214	10	of	of	ADP
fuelectenerg-7534	214	11	the	the	DET
fuelectenerg-7534	214	12	shell	shell	NOUN
fuelectenerg-7534	214	13	to	to	PART
fuelectenerg-7534	214	14	remove	remove	VERB
fuelectenerg-7534	214	15	the	the	DET
fuelectenerg-7534	214	16	sacrificial	sacrificial	ADJ
fuelectenerg-7534	214	17	layer	layer	NOUN
fuelectenerg-7534	214	18	;	;	PUNCT
fuelectenerg-7534	214	19	a	a	DET
fuelectenerg-7534	214	20	si3n4	si3n4	PROPN
fuelectenerg-7534	214	21	layer	layer	NOUN
fuelectenerg-7534	214	22	is	be	AUX
fuelectenerg-7534	214	23	then	then	ADV
fuelectenerg-7534	214	24	deposited	deposit	VERB
fuelectenerg-7534	214	25	by	by	ADP
fuelectenerg-7534	214	26	pecvd	pecvd	NOUN
fuelectenerg-7534	214	27	to	to	PART
fuelectenerg-7534	214	28	hermetically	hermetically	NOUN
fuelectenerg-7534	214	29	seal	seal	VERB
fuelectenerg-7534	214	30	the	the	DET
fuelectenerg-7534	214	31	structure	structure	NOUN
fuelectenerg-7534	214	32	.	.	PUNCT
fuelectenerg-7534	215	1	measurements	measurement	NOUN
fuelectenerg-7534	215	2	over	over	ADP
fuelectenerg-7534	215	3	hours	hour	NOUN
fuelectenerg-7534	215	4	of	of	ADP
fuelectenerg-7534	215	5	operations	operation	NOUN
fuelectenerg-7534	215	6	with	with	ADP
fuelectenerg-7534	215	7	square	square	ADJ
fuelectenerg-7534	215	8	bipolar	bipolar	ADJ
fuelectenerg-7534	215	9	biasing	bias	VERB
fuelectenerg-7534	215	10	voltages	voltage	NOUN
fuelectenerg-7534	215	11	show	show	VERB
fuelectenerg-7534	215	12	that	that	SCONJ
fuelectenerg-7534	215	13	both	both	DET
fuelectenerg-7534	215	14	actuation	actuation	NOUN
fuelectenerg-7534	215	15	voltage	voltage	NOUN
fuelectenerg-7534	215	16	and	and	CCONJ
fuelectenerg-7534	215	17	capacitance	capacitance	NOUN
fuelectenerg-7534	215	18	suffer	suffer	VERB
fuelectenerg-7534	215	19	from	from	ADP
fuelectenerg-7534	215	20	minimal	minimal	ADJ
fuelectenerg-7534	215	21	variations	variation	NOUN
fuelectenerg-7534	215	22	,	,	PUNCT
fuelectenerg-7534	215	23	leading	lead	VERB
fuelectenerg-7534	215	24	to	to	ADP
fuelectenerg-7534	215	25	an	an	DET
fuelectenerg-7534	215	26	increase	increase	NOUN
fuelectenerg-7534	215	27	of	of	ADP
fuelectenerg-7534	215	28	just	just	ADV
fuelectenerg-7534	215	29	0.2	0.2	NUM
fuelectenerg-7534	215	30	db	db	NOUN
fuelectenerg-7534	215	31	in	in	ADP
fuelectenerg-7534	215	32	insertion	insertion	NOUN
fuelectenerg-7534	215	33	loss	loss	NOUN
fuelectenerg-7534	215	34	.	.	PUNCT
fuelectenerg-7534	216	1	344	344	NUM
fuelectenerg-7534	216	2	g.	g.	PROPN
fuelectenerg-7534	216	3	tagliapietra	tagliapietra	PROPN
fuelectenerg-7534	216	4	,	,	PUNCT
fuelectenerg-7534	216	5	j.	j.	PROPN
fuelectenerg-7534	216	6	iannacci	iannacci	PROPN
fuelectenerg-7534	216	7	fig	fig	PROPN
fuelectenerg-7534	216	8	.	.	PUNCT
fuelectenerg-7534	217	1	4	4	NUM
fuelectenerg-7534	217	2	(	(	PUNCT
fuelectenerg-7534	217	3	a	a	PRON
fuelectenerg-7534	217	4	)	)	PUNCT
fuelectenerg-7534	217	5	general	general	ADJ
fuelectenerg-7534	217	6	practical	practical	ADJ
fuelectenerg-7534	217	7	implementation	implementation	NOUN
fuelectenerg-7534	217	8	of	of	ADP
fuelectenerg-7534	217	9	thin	thin	ADJ
fuelectenerg-7534	217	10	-	-	PUNCT
fuelectenerg-7534	217	11	film	film	NOUN
fuelectenerg-7534	217	12	packaging	packaging	NOUN
fuelectenerg-7534	217	13	reported	report	VERB
fuelectenerg-7534	217	14	in	in	ADP
fuelectenerg-7534	217	15	[	[	X
fuelectenerg-7534	217	16	47	47	NUM
fuelectenerg-7534	217	17	]	]	PUNCT
fuelectenerg-7534	217	18	,	,	PUNCT
fuelectenerg-7534	217	19	(	(	PUNCT
fuelectenerg-7534	217	20	b	b	X
fuelectenerg-7534	217	21	)	)	PUNCT
fuelectenerg-7534	217	22	cross	cross	NOUN
fuelectenerg-7534	217	23	section	section	NOUN
fuelectenerg-7534	217	24	of	of	ADP
fuelectenerg-7534	217	25	the	the	DET
fuelectenerg-7534	217	26	device	device	NOUN
fuelectenerg-7534	217	27	reported	report	VERB
fuelectenerg-7534	217	28	in	in	ADP
fuelectenerg-7534	217	29	[	[	X
fuelectenerg-7534	217	30	57	57	NUM
fuelectenerg-7534	217	31	]	]	PUNCT
fuelectenerg-7534	217	32	in	in	ADP
fuelectenerg-7534	217	33	both	both	DET
fuelectenerg-7534	217	34	its	its	PRON
fuelectenerg-7534	217	35	states	state	NOUN
fuelectenerg-7534	217	36	.	.	PUNCT
fuelectenerg-7534	218	1	an	an	DET
fuelectenerg-7534	218	2	interesting	interesting	ADJ
fuelectenerg-7534	218	3	contribution	contribution	NOUN
fuelectenerg-7534	218	4	is	be	AUX
fuelectenerg-7534	218	5	represented	represent	VERB
fuelectenerg-7534	218	6	by	by	ADP
fuelectenerg-7534	218	7	[	[	X
fuelectenerg-7534	218	8	58	58	NUM
fuelectenerg-7534	218	9	]	]	PUNCT
fuelectenerg-7534	218	10	,	,	PUNCT
fuelectenerg-7534	218	11	in	in	ADP
fuelectenerg-7534	218	12	which	which	PRON
fuelectenerg-7534	218	13	an	an	DET
fuelectenerg-7534	218	14	investigation	investigation	NOUN
fuelectenerg-7534	218	15	regarding	regard	VERB
fuelectenerg-7534	218	16	the	the	DET
fuelectenerg-7534	218	17	amount	amount	NOUN
fuelectenerg-7534	218	18	of	of	ADP
fuelectenerg-7534	218	19	perforated	perforated	ADJ
fuelectenerg-7534	218	20	area	area	NOUN
fuelectenerg-7534	218	21	on	on	ADP
fuelectenerg-7534	218	22	the	the	DET
fuelectenerg-7534	218	23	thin	thin	ADJ
fuelectenerg-7534	218	24	film	film	NOUN
fuelectenerg-7534	218	25	for	for	ADP
fuelectenerg-7534	218	26	the	the	DET
fuelectenerg-7534	218	27	proper	proper	ADJ
fuelectenerg-7534	218	28	release	release	NOUN
fuelectenerg-7534	218	29	of	of	ADP
fuelectenerg-7534	218	30	encapsulated	encapsulate	VERB
fuelectenerg-7534	218	31	devices	device	NOUN
fuelectenerg-7534	218	32	is	be	AUX
fuelectenerg-7534	218	33	reported	report	VERB
fuelectenerg-7534	218	34	.	.	PUNCT
fuelectenerg-7534	219	1	in	in	ADP
fuelectenerg-7534	219	2	this	this	DET
fuelectenerg-7534	219	3	work	work	NOUN
fuelectenerg-7534	219	4	,	,	PUNCT
fuelectenerg-7534	219	5	thin	thin	ADJ
fuelectenerg-7534	219	6	film	film	NOUN
fuelectenerg-7534	219	7	layer	layer	NOUN
fuelectenerg-7534	219	8	is	be	AUX
fuelectenerg-7534	219	9	perforated	perforate	VERB
fuelectenerg-7534	219	10	with	with	ADP
fuelectenerg-7534	219	11	holes	hole	NOUN
fuelectenerg-7534	219	12	of	of	ADP
fuelectenerg-7534	219	13	different	different	ADJ
fuelectenerg-7534	219	14	diameters	diameter	NOUN
fuelectenerg-7534	219	15	(	(	PUNCT
fuelectenerg-7534	219	16	7	7	NUM
fuelectenerg-7534	219	17	and	and	CCONJ
fuelectenerg-7534	219	18	8	8	NUM
fuelectenerg-7534	219	19	μm	μm	NUM
fuelectenerg-7534	219	20	)	)	PUNCT
fuelectenerg-7534	219	21	,	,	PUNCT
fuelectenerg-7534	219	22	and	and	CCONJ
fuelectenerg-7534	219	23	different	different	ADJ
fuelectenerg-7534	219	24	realizations	realization	NOUN
fuelectenerg-7534	219	25	of	of	ADP
fuelectenerg-7534	219	26	perforated	perforate	VERB
fuelectenerg-7534	219	27	films	film	NOUN
fuelectenerg-7534	219	28	are	be	AUX
fuelectenerg-7534	219	29	obtained	obtain	VERB
fuelectenerg-7534	219	30	,	,	PUNCT
fuelectenerg-7534	219	31	each	each	DET
fuelectenerg-7534	219	32	one	one	NOUN
fuelectenerg-7534	219	33	with	with	ADP
fuelectenerg-7534	219	34	a	a	DET
fuelectenerg-7534	219	35	different	different	ADJ
fuelectenerg-7534	219	36	percentage	percentage	NOUN
fuelectenerg-7534	219	37	of	of	ADP
fuelectenerg-7534	219	38	perforated	perforated	ADJ
fuelectenerg-7534	219	39	area	area	NOUN
fuelectenerg-7534	219	40	.	.	PUNCT
fuelectenerg-7534	220	1	after	after	ADP
fuelectenerg-7534	220	2	the	the	DET
fuelectenerg-7534	220	3	identification	identification	NOUN
fuelectenerg-7534	220	4	of	of	ADP
fuelectenerg-7534	220	5	the	the	DET
fuelectenerg-7534	220	6	most	most	ADV
fuelectenerg-7534	220	7	appropriate	appropriate	ADJ
fuelectenerg-7534	220	8	percentage	percentage	NOUN
fuelectenerg-7534	220	9	(	(	PUNCT
fuelectenerg-7534	220	10	at	at	ADP
fuelectenerg-7534	220	11	least	least	ADV
fuelectenerg-7534	220	12	57	57	NUM
fuelectenerg-7534	220	13	%	%	NOUN
fuelectenerg-7534	220	14	)	)	PUNCT
fuelectenerg-7534	220	15	,	,	PUNCT
fuelectenerg-7534	220	16	different	different	ADJ
fuelectenerg-7534	220	17	combinations	combination	NOUN
fuelectenerg-7534	220	18	of	of	ADP
fuelectenerg-7534	220	19	power	power	NOUN
fuelectenerg-7534	220	20	and	and	CCONJ
fuelectenerg-7534	220	21	time	time	NOUN
fuelectenerg-7534	220	22	are	be	AUX
fuelectenerg-7534	220	23	considered	consider	VERB
fuelectenerg-7534	220	24	for	for	ADP
fuelectenerg-7534	220	25	the	the	DET
fuelectenerg-7534	220	26	proper	proper	ADJ
fuelectenerg-7534	220	27	release	release	NOUN
fuelectenerg-7534	220	28	of	of	ADP
fuelectenerg-7534	220	29	the	the	DET
fuelectenerg-7534	220	30	considered	consider	VERB
fuelectenerg-7534	220	31	devices	device	NOUN
fuelectenerg-7534	220	32	.	.	PUNCT
fuelectenerg-7534	221	1	complete	complete	ADJ
fuelectenerg-7534	221	2	3d	3d	NUM
fuelectenerg-7534	221	3	fem	fem	NOUN
fuelectenerg-7534	221	4	(	(	PUNCT
fuelectenerg-7534	221	5	finite	finite	PROPN
fuelectenerg-7534	221	6	element	element	NOUN
fuelectenerg-7534	221	7	method	method	NOUN
fuelectenerg-7534	221	8	)	)	PUNCT
fuelectenerg-7534	221	9	models	model	NOUN
fuelectenerg-7534	221	10	of	of	ADP
fuelectenerg-7534	221	11	the	the	DET
fuelectenerg-7534	221	12	considered	consider	VERB
fuelectenerg-7534	221	13	realizations	realization	NOUN
fuelectenerg-7534	221	14	on	on	ADP
fuelectenerg-7534	221	15	gold	gold	NOUN
fuelectenerg-7534	221	16	cpw	cpw	NOUN
fuelectenerg-7534	221	17	have	have	AUX
fuelectenerg-7534	221	18	been	be	AUX
fuelectenerg-7534	221	19	implemented	implement	VERB
fuelectenerg-7534	221	20	and	and	CCONJ
fuelectenerg-7534	221	21	simulated	simulate	VERB
fuelectenerg-7534	221	22	,	,	PUNCT
fuelectenerg-7534	221	23	showing	show	VERB
fuelectenerg-7534	221	24	no	no	DET
fuelectenerg-7534	221	25	significant	significant	ADJ
fuelectenerg-7534	221	26	variations	variation	NOUN
fuelectenerg-7534	221	27	of	of	ADP
fuelectenerg-7534	221	28	return	return	NOUN
fuelectenerg-7534	221	29	or	or	CCONJ
fuelectenerg-7534	221	30	insertion	insertion	NOUN
fuelectenerg-7534	221	31	loss	loss	NOUN
fuelectenerg-7534	221	32	introduced	introduce	VERB
fuelectenerg-7534	221	33	by	by	ADP
fuelectenerg-7534	221	34	the	the	DET
fuelectenerg-7534	221	35	packaging	packaging	NOUN
fuelectenerg-7534	221	36	phase	phase	NOUN
fuelectenerg-7534	221	37	.	.	PUNCT
fuelectenerg-7534	222	1	(	(	PUNCT
fuelectenerg-7534	222	2	a	a	X
fuelectenerg-7534	222	3	)	)	PUNCT
fuelectenerg-7534	222	4	(	(	PUNCT
fuelectenerg-7534	222	5	b	b	X
fuelectenerg-7534	222	6	)	)	PUNCT
fuelectenerg-7534	222	7	a	a	DET
fuelectenerg-7534	222	8	comprehensive	comprehensive	ADJ
fuelectenerg-7534	222	9	overview	overview	NOUN
fuelectenerg-7534	222	10	of	of	ADP
fuelectenerg-7534	222	11	recent	recent	ADJ
fuelectenerg-7534	222	12	developments	development	NOUN
fuelectenerg-7534	222	13	in	in	ADP
fuelectenerg-7534	222	14	rf	rf	ADJ
fuelectenerg-7534	222	15	-	-	PUNCT
fuelectenerg-7534	222	16	mems	mems	ADJ
fuelectenerg-7534	222	17	technology	technology	NOUN
fuelectenerg-7534	222	18	345	345	NUM
fuelectenerg-7534	222	19	table	table	NOUN
fuelectenerg-7534	222	20	3	3	NUM
fuelectenerg-7534	222	21	comparison	comparison	NOUN
fuelectenerg-7534	222	22	between	between	ADP
fuelectenerg-7534	222	23	the	the	DET
fuelectenerg-7534	222	24	different	different	ADJ
fuelectenerg-7534	222	25	discussed	discuss	VERB
fuelectenerg-7534	222	26	packaging	packaging	NOUN
fuelectenerg-7534	222	27	implementations	implementation	NOUN
fuelectenerg-7534	222	28	,	,	PUNCT
fuelectenerg-7534	222	29	including	include	VERB
fuelectenerg-7534	222	30	both	both	DET
fuelectenerg-7534	222	31	cap	cap	NOUN
fuelectenerg-7534	222	32	and	and	CCONJ
fuelectenerg-7534	222	33	thin	thin	ADJ
fuelectenerg-7534	222	34	film	film	NOUN
fuelectenerg-7534	222	35	solutions	solution	NOUN
fuelectenerg-7534	222	36	.	.	PUNCT
fuelectenerg-7534	223	1	the	the	DET
fuelectenerg-7534	223	2	provided	provide	VERB
fuelectenerg-7534	223	3	dimensions	dimension	NOUN
fuelectenerg-7534	223	4	in	in	ADP
fuelectenerg-7534	223	5	the	the	DET
fuelectenerg-7534	223	6	order	order	NOUN
fuelectenerg-7534	223	7	of	of	ADP
fuelectenerg-7534	223	8	mm	mm	PROPN
fuelectenerg-7534	223	9	,	,	PUNCT
fuelectenerg-7534	223	10	and	and	CCONJ
fuelectenerg-7534	223	11	tens	ten	NOUN
fuelectenerg-7534	223	12	or	or	CCONJ
fuelectenerg-7534	223	13	hundreds	hundred	NOUN
fuelectenerg-7534	223	14	of	of	ADP
fuelectenerg-7534	223	15	µm	µm	NOUN
fuelectenerg-7534	223	16	,	,	PUNCT
fuelectenerg-7534	223	17	refer	refer	VERB
fuelectenerg-7534	223	18	to	to	ADP
fuelectenerg-7534	223	19	dimensions	dimension	NOUN
fuelectenerg-7534	223	20	of	of	ADP
fuelectenerg-7534	223	21	the	the	DET
fuelectenerg-7534	223	22	whole	whole	ADJ
fuelectenerg-7534	223	23	packaged	package	VERB
fuelectenerg-7534	223	24	device	device	NOUN
fuelectenerg-7534	223	25	.	.	PUNCT
fuelectenerg-7534	224	1	work	work	NOUN
fuelectenerg-7534	224	2	type	type	NOUN
fuelectenerg-7534	224	3	cap	cap	NOUN
fuelectenerg-7534	224	4	or	or	CCONJ
fuelectenerg-7534	224	5	film/	film/	NUM
fuelectenerg-7534	224	6	sealing	seal	VERB
fuelectenerg-7534	224	7	dimensions	dimension	NOUN
fuelectenerg-7534	224	8	ins	in	NOUN
fuelectenerg-7534	224	9	.	.	PUNCT
fuelectenerg-7534	225	1	loss	loss	NOUN
fuelectenerg-7534	225	2	isolation	isolation	NOUN
fuelectenerg-7534	225	3	temp	temp	NOUN
fuelectenerg-7534	225	4	.	.	PUNCT
fuelectenerg-7534	226	1	materials	material	NOUN
fuelectenerg-7534	226	2	(	(	PUNCT
fuelectenerg-7534	226	3	µm	µm	NOUN
fuelectenerg-7534	226	4	)	)	PUNCT
fuelectenerg-7534	226	5	(	(	PUNCT
fuelectenerg-7534	226	6	db/@ghz	db/@ghz	NOUN
fuelectenerg-7534	226	7	)	)	PUNCT
fuelectenerg-7534	226	8	(	(	PUNCT
fuelectenerg-7534	226	9	db/@ghz	db/@ghz	NOUN
fuelectenerg-7534	226	10	)	)	PUNCT
fuelectenerg-7534	226	11	°	°	ADP
fuelectenerg-7534	226	12	c	c	NOUN
fuelectenerg-7534	226	13	[	[	X
fuelectenerg-7534	226	14	49	49	NUM
fuelectenerg-7534	226	15	]	]	PUNCT
fuelectenerg-7534	226	16	cap	cap	NOUN
fuelectenerg-7534	226	17	ltcc	ltcc	X
fuelectenerg-7534	226	18	/	/	SYM
fuelectenerg-7534	226	19	au	au	PROPN
fuelectenerg-7534	226	20	1.4x0.9x0.8	1.4x0.9x0.8	NUM
fuelectenerg-7534	226	21	0.5/5	0.5/5	NUM
fuelectenerg-7534	226	22	20/5	20/5	NUM
fuelectenerg-7534	226	23	250	250	NUM
fuelectenerg-7534	226	24	[	[	SYM
fuelectenerg-7534	226	25	50	50	NUM
fuelectenerg-7534	226	26	]	]	PUNCT
fuelectenerg-7534	226	27	cap	cap	NOUN
fuelectenerg-7534	226	28	bcb	bcb	PROPN
fuelectenerg-7534	226	29	/	/	SYM
fuelectenerg-7534	226	30	bcb	bcb	PROPN
fuelectenerg-7534	226	31	2mm2x28	2mm2x28	NUM
fuelectenerg-7534	226	32	0.7/30	0.7/30	PROPN
fuelectenerg-7534	227	1	18/30	18/30	NUM
fuelectenerg-7534	227	2	250	250	NUM
fuelectenerg-7534	227	3	[	[	X
fuelectenerg-7534	227	4	51	51	NUM
fuelectenerg-7534	227	5	]	]	PUNCT
fuelectenerg-7534	227	6	cap	cap	NOUN
fuelectenerg-7534	227	7	si	si	NOUN
fuelectenerg-7534	227	8	5000x4000x950	5000x4000x950	NUM
fuelectenerg-7534	227	9	0.5/6	0.5/6	NUM
fuelectenerg-7534	227	10	24/2.5	24/2.5	NUM
fuelectenerg-7534	228	1	[	[	PUNCT
fuelectenerg-7534	228	2	48	48	NUM
fuelectenerg-7534	228	3	]	]	PUNCT
fuelectenerg-7534	228	4	cap	cap	NOUN
fuelectenerg-7534	228	5	sio2	sio2	PROPN
fuelectenerg-7534	228	6	/	/	SYM
fuelectenerg-7534	228	7	su-8	su-8	NOUN
fuelectenerg-7534	228	8	0.7/30	0.7/30	NUM
fuelectenerg-7534	228	9	200	200	NUM
fuelectenerg-7534	228	10	[	[	SYM
fuelectenerg-7534	228	11	52	52	NUM
fuelectenerg-7534	228	12	]	]	PUNCT
fuelectenerg-7534	228	13	cap	cap	NOUN
fuelectenerg-7534	228	14	si	si	PROPN
fuelectenerg-7534	228	15	/	/	SYM
fuelectenerg-7534	228	16	bcb	bcb	PROPN
fuelectenerg-7534	228	17	0.4/35	0.4/35	PROPN
fuelectenerg-7534	229	1	35/35	35/35	NUM
fuelectenerg-7534	229	2	250	250	NUM
fuelectenerg-7534	230	1	[	[	X
fuelectenerg-7534	230	2	53	53	NUM
fuelectenerg-7534	230	3	]	]	PUNCT
fuelectenerg-7534	230	4	film	film	NOUN
fuelectenerg-7534	230	5	au	au	PROPN
fuelectenerg-7534	230	6	/	/	SYM
fuelectenerg-7534	230	7	sio2	sio2	NOUN
fuelectenerg-7534	230	8	27/2	27/2	PROPN
fuelectenerg-7534	230	9	<	<	X
fuelectenerg-7534	230	10	120	120	NUM
fuelectenerg-7534	230	11	[	[	X
fuelectenerg-7534	230	12	54	54	NUM
fuelectenerg-7534	230	13	]	]	PUNCT
fuelectenerg-7534	230	14	film	film	NOUN
fuelectenerg-7534	230	15	si3n4	si3n4	PROPN
fuelectenerg-7534	230	16	/	/	SYM
fuelectenerg-7534	230	17	au	au	X
fuelectenerg-7534	230	18	75x80x	75x80x	NUM
fuelectenerg-7534	230	19	1.2	1.2	NUM
fuelectenerg-7534	230	20	30/2	30/2	NUM
fuelectenerg-7534	230	21	[	[	X
fuelectenerg-7534	230	22	56	56	NUM
fuelectenerg-7534	230	23	]	]	X
fuelectenerg-7534	230	24	film	film	NOUN
fuelectenerg-7534	230	25	na	na	NOUN
fuelectenerg-7534	230	26	/	/	SYM
fuelectenerg-7534	230	27	sio2	sio2	NOUN
fuelectenerg-7534	230	28	x	x	X
fuelectenerg-7534	230	29	x4	x4	ADV
fuelectenerg-7534	230	30	0.45/142	0.45/142	NUM
fuelectenerg-7534	231	1	51.6/142	51.6/142	NUM
fuelectenerg-7534	231	2	200	200	NUM
fuelectenerg-7534	231	3	[	[	X
fuelectenerg-7534	231	4	55	55	NUM
fuelectenerg-7534	231	5	]	]	SYM
fuelectenerg-7534	231	6	film	film	NOUN
fuelectenerg-7534	231	7	sio2/	sio2/	X
fuelectenerg-7534	231	8	alx2010	alx2010	NOUN
fuelectenerg-7534	231	9	<	<	X
fuelectenerg-7534	231	10	600x600x	600x600x	NUM
fuelectenerg-7534	231	11	0.25/12	0.25/12	NOUN
fuelectenerg-7534	232	1	35/12	35/12	NUM
fuelectenerg-7534	232	2	[	[	X
fuelectenerg-7534	232	3	57	57	NUM
fuelectenerg-7534	232	4	]	]	PUNCT
fuelectenerg-7534	232	5	film	film	NOUN
fuelectenerg-7534	232	6	si3n4	si3n4	PROPN
fuelectenerg-7534	232	7	70x50x	70x50x	NUM
fuelectenerg-7534	232	8	2/25	2/25	NUM
fuelectenerg-7534	232	9	8/25	8/25	NUM
fuelectenerg-7534	232	10	4	4	NUM
fuelectenerg-7534	232	11	.	.	PUNCT
fuelectenerg-7534	232	12	phase	phase	NOUN
fuelectenerg-7534	232	13	shifters	shifter	NOUN
fuelectenerg-7534	232	14	being	be	AUX
fuelectenerg-7534	232	15	vital	vital	ADJ
fuelectenerg-7534	232	16	components	component	NOUN
fuelectenerg-7534	232	17	in	in	ADP
fuelectenerg-7534	232	18	the	the	DET
fuelectenerg-7534	232	19	architecture	architecture	NOUN
fuelectenerg-7534	232	20	of	of	ADP
fuelectenerg-7534	232	21	phased	phase	VERB
fuelectenerg-7534	232	22	arrays	array	NOUN
fuelectenerg-7534	232	23	and	and	CCONJ
fuelectenerg-7534	232	24	rf	rf	PRON
fuelectenerg-7534	232	25	front	front	NOUN
fuelectenerg-7534	232	26	ends	end	VERB
fuelectenerg-7534	232	27	,	,	PUNCT
fuelectenerg-7534	232	28	phase	phase	NOUN
fuelectenerg-7534	232	29	shifters	shifter	NOUN
fuelectenerg-7534	232	30	are	be	AUX
fuelectenerg-7534	232	31	abundantly	abundantly	ADV
fuelectenerg-7534	232	32	employed	employ	VERB
fuelectenerg-7534	232	33	in	in	ADP
fuelectenerg-7534	232	34	radar	radar	NOUN
fuelectenerg-7534	232	35	systems	system	NOUN
fuelectenerg-7534	232	36	(	(	PUNCT
fuelectenerg-7534	232	37	l	l	NOUN
fuelectenerg-7534	232	38	,	,	PUNCT
fuelectenerg-7534	232	39	s	s	X
fuelectenerg-7534	232	40	,	,	PUNCT
fuelectenerg-7534	232	41	c	c	X
fuelectenerg-7534	232	42	,	,	PUNCT
fuelectenerg-7534	232	43	x	x	NOUN
fuelectenerg-7534	232	44	bands	band	NOUN
fuelectenerg-7534	232	45	)	)	PUNCT
fuelectenerg-7534	232	46	,	,	PUNCT
fuelectenerg-7534	232	47	as	as	ADV
fuelectenerg-7534	232	48	well	well	ADV
fuelectenerg-7534	232	49	as	as	ADP
fuelectenerg-7534	232	50	for	for	ADP
fuelectenerg-7534	232	51	mobile	mobile	ADJ
fuelectenerg-7534	232	52	and	and	CCONJ
fuelectenerg-7534	232	53	satellite	satellite	NOUN
fuelectenerg-7534	232	54	communications	communication	NOUN
fuelectenerg-7534	232	55	(	(	PUNCT
fuelectenerg-7534	232	56	ku	ku	PROPN
fuelectenerg-7534	232	57	,	,	PUNCT
fuelectenerg-7534	232	58	k	k	PROPN
fuelectenerg-7534	232	59	,	,	PUNCT
fuelectenerg-7534	232	60	ka	ka	PROPN
fuelectenerg-7534	232	61	bands	bands	PROPN
fuelectenerg-7534	232	62	)	)	PUNCT
fuelectenerg-7534	232	63	.	.	PUNCT
fuelectenerg-7534	233	1	current	current	ADJ
fuelectenerg-7534	233	2	developments	development	NOUN
fuelectenerg-7534	233	3	in	in	ADP
fuelectenerg-7534	233	4	terms	term	NOUN
fuelectenerg-7534	233	5	of	of	ADP
fuelectenerg-7534	233	6	mobile	mobile	ADJ
fuelectenerg-7534	233	7	communications	communication	NOUN
fuelectenerg-7534	233	8	,	,	PUNCT
fuelectenerg-7534	233	9	with	with	ADP
fuelectenerg-7534	233	10	the	the	DET
fuelectenerg-7534	233	11	adoption	adoption	NOUN
fuelectenerg-7534	233	12	of	of	ADP
fuelectenerg-7534	233	13	millimeter	millimeter	NOUN
fuelectenerg-7534	233	14	wave	wave	NOUN
fuelectenerg-7534	233	15	frequencies	frequency	NOUN
fuelectenerg-7534	233	16	,	,	PUNCT
fuelectenerg-7534	233	17	determined	determine	VERB
fuelectenerg-7534	233	18	an	an	DET
fuelectenerg-7534	233	19	accentuated	accentuated	ADJ
fuelectenerg-7534	233	20	interest	interest	NOUN
fuelectenerg-7534	233	21	towards	towards	ADP
fuelectenerg-7534	233	22	mems	mem	NOUN
fuelectenerg-7534	233	23	-	-	PUNCT
fuelectenerg-7534	233	24	based	base	VERB
fuelectenerg-7534	233	25	phase	phase	NOUN
fuelectenerg-7534	233	26	shifters	shifter	NOUN
fuelectenerg-7534	233	27	.	.	PUNCT
fuelectenerg-7534	234	1	consequently	consequently	ADV
fuelectenerg-7534	234	2	,	,	PUNCT
fuelectenerg-7534	234	3	the	the	DET
fuelectenerg-7534	234	4	literature	literature	NOUN
fuelectenerg-7534	234	5	regarding	regard	VERB
fuelectenerg-7534	234	6	this	this	DET
fuelectenerg-7534	234	7	field	field	NOUN
fuelectenerg-7534	234	8	is	be	AUX
fuelectenerg-7534	234	9	quite	quite	ADV
fuelectenerg-7534	234	10	populated	populated	ADJ
fuelectenerg-7534	234	11	.	.	PUNCT
fuelectenerg-7534	235	1	the	the	DET
fuelectenerg-7534	235	2	first	first	ADJ
fuelectenerg-7534	235	3	implementations	implementation	NOUN
fuelectenerg-7534	235	4	of	of	ADP
fuelectenerg-7534	235	5	phase	phase	NOUN
fuelectenerg-7534	235	6	shifters	shifter	NOUN
fuelectenerg-7534	235	7	based	base	VERB
fuelectenerg-7534	235	8	on	on	ADP
fuelectenerg-7534	235	9	rf	rf	NOUN
fuelectenerg-7534	235	10	-	-	PUNCT
fuelectenerg-7534	235	11	mems	mem	NOUN
fuelectenerg-7534	235	12	were	be	AUX
fuelectenerg-7534	235	13	proposed	propose	VERB
fuelectenerg-7534	235	14	in	in	ADP
fuelectenerg-7534	235	15	late	late	ADJ
fuelectenerg-7534	235	16	`	`	NOUN
fuelectenerg-7534	235	17	90s	90	NOUN
fuelectenerg-7534	235	18	,	,	PUNCT
fuelectenerg-7534	235	19	both	both	DET
fuelectenerg-7534	235	20	concerning	concern	VERB
fuelectenerg-7534	235	21	digital	digital	PROPN
fuelectenerg-7534	235	22	[	[	X
fuelectenerg-7534	235	23	59	59	NUM
fuelectenerg-7534	235	24	]	]	PUNCT
fuelectenerg-7534	235	25	and	and	CCONJ
fuelectenerg-7534	235	26	analog	analog	NOUN
fuelectenerg-7534	235	27	[	[	X
fuelectenerg-7534	235	28	60][61	60][61	NOUN
fuelectenerg-7534	235	29	]	]	X
fuelectenerg-7534	235	30	realizations	realization	NOUN
fuelectenerg-7534	235	31	.	.	PUNCT
fuelectenerg-7534	236	1	shortly	shortly	ADV
fuelectenerg-7534	236	2	after	after	ADV
fuelectenerg-7534	236	3	,	,	PUNCT
fuelectenerg-7534	236	4	the	the	DET
fuelectenerg-7534	236	5	main	main	ADJ
fuelectenerg-7534	236	6	topologies	topology	NOUN
fuelectenerg-7534	236	7	concerning	concern	VERB
fuelectenerg-7534	236	8	the	the	DET
fuelectenerg-7534	236	9	architecture	architecture	NOUN
fuelectenerg-7534	236	10	of	of	ADP
fuelectenerg-7534	236	11	the	the	DET
fuelectenerg-7534	236	12	proposed	propose	VERB
fuelectenerg-7534	236	13	phase	phase	NOUN
fuelectenerg-7534	236	14	shifters	shifter	NOUN
fuelectenerg-7534	236	15	were	be	AUX
fuelectenerg-7534	236	16	defined	define	VERB
fuelectenerg-7534	236	17	,	,	PUNCT
fuelectenerg-7534	236	18	according	accord	VERB
fuelectenerg-7534	236	19	to	to	ADP
fuelectenerg-7534	236	20	the	the	DET
fuelectenerg-7534	236	21	following	follow	VERB
fuelectenerg-7534	236	22	classification	classification	NOUN
fuelectenerg-7534	236	23	:	:	PUNCT
fuelectenerg-7534	236	24	switched	switch	VERB
fuelectenerg-7534	236	25	-	-	PUNCT
fuelectenerg-7534	236	26	line	line	NOUN
fuelectenerg-7534	236	27	(	(	PUNCT
fuelectenerg-7534	236	28	sl	sl	NOUN
fuelectenerg-7534	236	29	)	)	PUNCT
fuelectenerg-7534	236	30	,	,	PUNCT
fuelectenerg-7534	236	31	loaded	load	VERB
fuelectenerg-7534	236	32	-	-	PUNCT
fuelectenerg-7534	236	33	line	line	NOUN
fuelectenerg-7534	236	34	(	(	PUNCT
fuelectenerg-7534	236	35	ll	ll	NOUN
fuelectenerg-7534	236	36	)	)	PUNCT
fuelectenerg-7534	236	37	,	,	PUNCT
fuelectenerg-7534	236	38	distributed	distribute	VERB
fuelectenerg-7534	236	39	mems	mem	NOUN
fuelectenerg-7534	236	40	transmission	transmission	NOUN
fuelectenerg-7534	236	41	line	line	NOUN
fuelectenerg-7534	236	42	(	(	PUNCT
fuelectenerg-7534	236	43	dmtl	dmtl	NOUN
fuelectenerg-7534	236	44	)	)	PUNCT
fuelectenerg-7534	236	45	,	,	PUNCT
fuelectenerg-7534	236	46	and	and	CCONJ
fuelectenerg-7534	236	47	reflection	reflection	NOUN
fuelectenerg-7534	236	48	-	-	PUNCT
fuelectenerg-7534	236	49	type	type	NOUN
fuelectenerg-7534	236	50	(	(	PUNCT
fuelectenerg-7534	236	51	rt	rt	NOUN
fuelectenerg-7534	236	52	)	)	PUNCT
fuelectenerg-7534	236	53	phase	phase	NOUN
fuelectenerg-7534	236	54	shifters	shifter	NOUN
fuelectenerg-7534	236	55	.	.	PUNCT
fuelectenerg-7534	237	1	as	as	SCONJ
fuelectenerg-7534	237	2	reported	report	VERB
fuelectenerg-7534	237	3	by	by	ADP
fuelectenerg-7534	237	4	more	more	ADJ
fuelectenerg-7534	237	5	comprehensive	comprehensive	ADJ
fuelectenerg-7534	237	6	books	book	NOUN
fuelectenerg-7534	237	7	and	and	CCONJ
fuelectenerg-7534	237	8	overviews	overview	NOUN
fuelectenerg-7534	237	9	,	,	PUNCT
fuelectenerg-7534	237	10	such	such	ADJ
fuelectenerg-7534	237	11	as	as	ADP
fuelectenerg-7534	237	12	[	[	X
fuelectenerg-7534	237	13	62][63][64	62][63][64	NOUN
fuelectenerg-7534	237	14	]	]	PUNCT
fuelectenerg-7534	237	15	,	,	PUNCT
fuelectenerg-7534	237	16	the	the	DET
fuelectenerg-7534	237	17	working	work	VERB
fuelectenerg-7534	237	18	principle	principle	NOUN
fuelectenerg-7534	237	19	of	of	ADP
fuelectenerg-7534	237	20	switched	switch	VERB
fuelectenerg-7534	237	21	-	-	PUNCT
fuelectenerg-7534	237	22	line	line	NOUN
fuelectenerg-7534	237	23	devices	device	NOUN
fuelectenerg-7534	237	24	is	be	AUX
fuelectenerg-7534	237	25	the	the	DET
fuelectenerg-7534	237	26	switching	switching	NOUN
fuelectenerg-7534	237	27	between	between	ADP
fuelectenerg-7534	237	28	signal	signal	ADJ
fuelectenerg-7534	237	29	paths	path	NOUN
fuelectenerg-7534	237	30	of	of	ADP
fuelectenerg-7534	237	31	different	different	ADJ
fuelectenerg-7534	237	32	electrical	electrical	ADJ
fuelectenerg-7534	237	33	length	length	NOUN
fuelectenerg-7534	237	34	,	,	PUNCT
fuelectenerg-7534	237	35	in	in	ADP
fuelectenerg-7534	237	36	order	order	NOUN
fuelectenerg-7534	237	37	to	to	PART
fuelectenerg-7534	237	38	achieve	achieve	VERB
fuelectenerg-7534	237	39	the	the	DET
fuelectenerg-7534	237	40	desired	desire	VERB
fuelectenerg-7534	237	41	phase	phase	NOUN
fuelectenerg-7534	237	42	delay	delay	NOUN
fuelectenerg-7534	237	43	.	.	PUNCT
fuelectenerg-7534	238	1	however	however	ADV
fuelectenerg-7534	238	2	,	,	PUNCT
fuelectenerg-7534	238	3	when	when	SCONJ
fuelectenerg-7534	238	4	a	a	DET
fuelectenerg-7534	238	5	wide	wide	ADJ
fuelectenerg-7534	238	6	phase	phase	NOUN
fuelectenerg-7534	238	7	shifting	shift	VERB
fuelectenerg-7534	238	8	range	range	NOUN
fuelectenerg-7534	238	9	or	or	CCONJ
fuelectenerg-7534	238	10	multiple	multiple	ADJ
fuelectenerg-7534	238	11	small	small	ADJ
fuelectenerg-7534	238	12	phase	phase	NOUN
fuelectenerg-7534	238	13	steps	step	NOUN
fuelectenerg-7534	238	14	are	be	AUX
fuelectenerg-7534	238	15	required	require	VERB
fuelectenerg-7534	238	16	,	,	PUNCT
fuelectenerg-7534	238	17	such	such	ADJ
fuelectenerg-7534	238	18	strategy	strategy	NOUN
fuelectenerg-7534	238	19	may	may	AUX
fuelectenerg-7534	238	20	lead	lead	VERB
fuelectenerg-7534	238	21	to	to	ADP
fuelectenerg-7534	238	22	bulky	bulky	ADJ
fuelectenerg-7534	238	23	arrangements	arrangement	NOUN
fuelectenerg-7534	238	24	.	.	PUNCT
fuelectenerg-7534	239	1	conceptually	conceptually	ADV
fuelectenerg-7534	239	2	similar	similar	ADJ
fuelectenerg-7534	239	3	,	,	PUNCT
fuelectenerg-7534	239	4	the	the	DET
fuelectenerg-7534	239	5	basic	basic	ADJ
fuelectenerg-7534	239	6	idea	idea	NOUN
fuelectenerg-7534	239	7	of	of	ADP
fuelectenerg-7534	239	8	loaded	load	VERB
fuelectenerg-7534	239	9	-	-	PUNCT
fuelectenerg-7534	239	10	line	line	NOUN
fuelectenerg-7534	239	11	phase	phase	NOUN
fuelectenerg-7534	239	12	shifters	shifter	NOUN
fuelectenerg-7534	239	13	is	be	AUX
fuelectenerg-7534	239	14	to	to	PART
fuelectenerg-7534	239	15	load	load	VERB
fuelectenerg-7534	239	16	a	a	DET
fuelectenerg-7534	239	17	transmission	transmission	NOUN
fuelectenerg-7534	239	18	line	line	NOUN
fuelectenerg-7534	239	19	with	with	ADP
fuelectenerg-7534	239	20	two	two	NUM
fuelectenerg-7534	239	21	reactive	reactive	ADJ
fuelectenerg-7534	239	22	impedance	impedance	NOUN
fuelectenerg-7534	239	23	networks	network	NOUN
fuelectenerg-7534	239	24	.	.	PUNCT
fuelectenerg-7534	240	1	often	often	ADV
fuelectenerg-7534	240	2	realized	realize	VERB
fuelectenerg-7534	240	3	with	with	ADP
fuelectenerg-7534	240	4	stubs	stub	NOUN
fuelectenerg-7534	240	5	,	,	PUNCT
fuelectenerg-7534	240	6	capacitive	capacitive	ADJ
fuelectenerg-7534	240	7	or	or	CCONJ
fuelectenerg-7534	240	8	inductive	inductive	ADJ
fuelectenerg-7534	240	9	loads	load	NOUN
fuelectenerg-7534	240	10	will	will	AUX
fuelectenerg-7534	240	11	cause	cause	VERB
fuelectenerg-7534	240	12	phase	phase	NOUN
fuelectenerg-7534	240	13	lags	lag	NOUN
fuelectenerg-7534	240	14	or	or	CCONJ
fuelectenerg-7534	240	15	leads	lead	VERB
fuelectenerg-7534	240	16	respectively	respectively	ADV
fuelectenerg-7534	240	17	,	,	PUNCT
fuelectenerg-7534	240	18	while	while	SCONJ
fuelectenerg-7534	240	19	the	the	DET
fuelectenerg-7534	240	20	transmission	transmission	NOUN
fuelectenerg-7534	240	21	line	line	NOUN
fuelectenerg-7534	240	22	section	section	NOUN
fuelectenerg-7534	240	23	will	will	AUX
fuelectenerg-7534	240	24	ensure	ensure	VERB
fuelectenerg-7534	240	25	impedance	impedance	NOUN
fuelectenerg-7534	240	26	matching	matching	NOUN
fuelectenerg-7534	240	27	.	.	PUNCT
fuelectenerg-7534	241	1	as	as	ADP
fuelectenerg-7534	241	2	in	in	ADP
fuelectenerg-7534	241	3	the	the	DET
fuelectenerg-7534	241	4	case	case	NOUN
fuelectenerg-7534	241	5	of	of	ADP
fuelectenerg-7534	241	6	switched	switch	VERB
fuelectenerg-7534	241	7	-	-	PUNCT
fuelectenerg-7534	241	8	line	line	NOUN
fuelectenerg-7534	241	9	devices	device	NOUN
fuelectenerg-7534	241	10	,	,	PUNCT
fuelectenerg-7534	241	11	extended	extend	VERB
fuelectenerg-7534	241	12	shifting	shifting	NOUN
fuelectenerg-7534	241	13	performances	performance	NOUN
fuelectenerg-7534	241	14	will	will	AUX
fuelectenerg-7534	241	15	lead	lead	VERB
fuelectenerg-7534	241	16	to	to	ADP
fuelectenerg-7534	241	17	bulky	bulky	ADJ
fuelectenerg-7534	241	18	phase	phase	NOUN
fuelectenerg-7534	241	19	shifters	shifter	NOUN
fuelectenerg-7534	241	20	.	.	PUNCT
fuelectenerg-7534	242	1	in	in	ADP
fuelectenerg-7534	242	2	case	case	NOUN
fuelectenerg-7534	242	3	of	of	ADP
fuelectenerg-7534	242	4	dmtl	dmtl	NOUN
fuelectenerg-7534	242	5	,	,	PUNCT
fuelectenerg-7534	242	6	the	the	DET
fuelectenerg-7534	242	7	transmission	transmission	NOUN
fuelectenerg-7534	242	8	line	line	NOUN
fuelectenerg-7534	242	9	of	of	ADP
fuelectenerg-7534	242	10	the	the	DET
fuelectenerg-7534	242	11	signal	signal	ADJ
fuelectenerg-7534	242	12	path	path	NOUN
fuelectenerg-7534	242	13	is	be	AUX
fuelectenerg-7534	242	14	periodically	periodically	ADV
fuelectenerg-7534	242	15	loaded	load	VERB
fuelectenerg-7534	242	16	with	with	ADP
fuelectenerg-7534	242	17	varactors	varactor	NOUN
fuelectenerg-7534	242	18	,	,	PUNCT
fuelectenerg-7534	242	19	changing	change	VERB
fuelectenerg-7534	242	20	the	the	DET
fuelectenerg-7534	242	21	distributed	distribute	VERB
fuelectenerg-7534	242	22	capacitance	capacitance	NOUN
fuelectenerg-7534	242	23	of	of	ADP
fuelectenerg-7534	242	24	the	the	DET
fuelectenerg-7534	242	25	line	line	NOUN
fuelectenerg-7534	242	26	and	and	CCONJ
fuelectenerg-7534	242	27	,	,	PUNCT
fuelectenerg-7534	242	28	in	in	ADP
fuelectenerg-7534	242	29	turn	turn	NOUN
fuelectenerg-7534	242	30	,	,	PUNCT
fuelectenerg-7534	242	31	the	the	DET
fuelectenerg-7534	242	32	line	line	NOUN
fuelectenerg-7534	242	33	phase	phase	NOUN
fuelectenerg-7534	242	34	constant	constant	ADJ
fuelectenerg-7534	242	35	and	and	CCONJ
fuelectenerg-7534	242	36	,	,	PUNCT
fuelectenerg-7534	242	37	finally	finally	ADV
fuelectenerg-7534	242	38	,	,	PUNCT
fuelectenerg-7534	242	39	the	the	DET
fuelectenerg-7534	242	40	resulting	result	VERB
fuelectenerg-7534	242	41	phase	phase	NOUN
fuelectenerg-7534	242	42	delay	delay	NOUN
fuelectenerg-7534	242	43	at	at	ADP
fuelectenerg-7534	242	44	the	the	DET
fuelectenerg-7534	242	45	output	output	NOUN
fuelectenerg-7534	242	46	port	port	NOUN
fuelectenerg-7534	242	47	.	.	PUNCT
fuelectenerg-7534	243	1	when	when	SCONJ
fuelectenerg-7534	243	2	wide	wide	ADV
fuelectenerg-7534	243	3	shifting	shifting	NOUN
fuelectenerg-7534	243	4	or	or	CCONJ
fuelectenerg-7534	243	5	precision	precision	NOUN
fuelectenerg-7534	243	6	performances	performance	NOUN
fuelectenerg-7534	243	7	are	be	AUX
fuelectenerg-7534	243	8	required	require	VERB
fuelectenerg-7534	243	9	,	,	PUNCT
fuelectenerg-7534	243	10	the	the	DET
fuelectenerg-7534	243	11	presence	presence	NOUN
fuelectenerg-7534	243	12	of	of	ADP
fuelectenerg-7534	243	13	multiple	multiple	ADJ
fuelectenerg-7534	243	14	mems	mem	NOUN
fuelectenerg-7534	243	15	capacitive	capacitive	ADJ
fuelectenerg-7534	243	16	membranes	membrane	NOUN
fuelectenerg-7534	243	17	determines	determine	VERB
fuelectenerg-7534	243	18	arrangements	arrangement	NOUN
fuelectenerg-7534	243	19	with	with	ADP
fuelectenerg-7534	243	20	pronounced	pronounced	ADJ
fuelectenerg-7534	243	21	area	area	NOUN
fuelectenerg-7534	243	22	,	,	PUNCT
fuelectenerg-7534	243	23	high	high	ADJ
fuelectenerg-7534	243	24	aspect	aspect	NOUN
fuelectenerg-7534	243	25	ratio	ratio	NOUN
fuelectenerg-7534	243	26	and	and	CCONJ
fuelectenerg-7534	243	27	prone	prone	ADJ
fuelectenerg-7534	243	28	to	to	ADP
fuelectenerg-7534	243	29	reliability	reliability	NOUN
fuelectenerg-7534	243	30	issues	issue	NOUN
fuelectenerg-7534	243	31	.	.	PUNCT
fuelectenerg-7534	244	1	346	346	NUM
fuelectenerg-7534	244	2	g.	g.	NOUN
fuelectenerg-7534	244	3	tagliapietra	tagliapietra	PROPN
fuelectenerg-7534	244	4	,	,	PUNCT
fuelectenerg-7534	244	5	j.	j.	PROPN
fuelectenerg-7534	244	6	iannacci	iannacci	PROPN
fuelectenerg-7534	244	7	rt	rt	PROPN
fuelectenerg-7534	244	8	phase	phase	NOUN
fuelectenerg-7534	244	9	shifters	shifter	NOUN
fuelectenerg-7534	244	10	typically	typically	ADV
fuelectenerg-7534	244	11	employ	employ	VERB
fuelectenerg-7534	244	12	quadrature	quadrature	NOUN
fuelectenerg-7534	244	13	couplers	coupler	NOUN
fuelectenerg-7534	244	14	with	with	ADP
fuelectenerg-7534	244	15	equal	equal	ADJ
fuelectenerg-7534	244	16	and	and	CCONJ
fuelectenerg-7534	244	17	tunable	tunable	ADJ
fuelectenerg-7534	244	18	reflective	reflective	ADJ
fuelectenerg-7534	244	19	loads	load	NOUN
fuelectenerg-7534	244	20	connected	connect	VERB
fuelectenerg-7534	244	21	to	to	ADP
fuelectenerg-7534	244	22	coupled	couple	VERB
fuelectenerg-7534	244	23	ports	port	NOUN
fuelectenerg-7534	244	24	,	,	PUNCT
fuelectenerg-7534	244	25	controlling	control	VERB
fuelectenerg-7534	244	26	the	the	DET
fuelectenerg-7534	244	27	phase	phase	NOUN
fuelectenerg-7534	244	28	delay	delay	NOUN
fuelectenerg-7534	244	29	of	of	ADP
fuelectenerg-7534	244	30	the	the	DET
fuelectenerg-7534	244	31	reflected	reflect	VERB
fuelectenerg-7534	244	32	signal	signal	NOUN
fuelectenerg-7534	244	33	.	.	PUNCT
fuelectenerg-7534	245	1	although	although	SCONJ
fuelectenerg-7534	245	2	this	this	DET
fuelectenerg-7534	245	3	approach	approach	NOUN
fuelectenerg-7534	245	4	may	may	AUX
fuelectenerg-7534	245	5	seem	seem	VERB
fuelectenerg-7534	245	6	less	less	ADV
fuelectenerg-7534	245	7	troublesome	troublesome	ADJ
fuelectenerg-7534	245	8	,	,	PUNCT
fuelectenerg-7534	245	9	it	it	PRON
fuelectenerg-7534	245	10	is	be	AUX
fuelectenerg-7534	245	11	characterized	characterize	VERB
fuelectenerg-7534	245	12	by	by	ADP
fuelectenerg-7534	245	13	underlying	underlie	VERB
fuelectenerg-7534	245	14	trade	trade	NOUN
fuelectenerg-7534	245	15	-	-	PUNCT
fuelectenerg-7534	245	16	off	off	NOUN
fuelectenerg-7534	245	17	between	between	ADP
fuelectenerg-7534	245	18	the	the	DET
fuelectenerg-7534	245	19	achievable	achievable	ADJ
fuelectenerg-7534	245	20	shift	shift	NOUN
fuelectenerg-7534	245	21	range	range	NOUN
fuelectenerg-7534	245	22	and	and	CCONJ
fuelectenerg-7534	245	23	the	the	DET
fuelectenerg-7534	245	24	insertion	insertion	NOUN
fuelectenerg-7534	245	25	loss	loss	NOUN
fuelectenerg-7534	245	26	.	.	PUNCT
fuelectenerg-7534	246	1	such	such	ADJ
fuelectenerg-7534	246	2	trade	trade	NOUN
fuelectenerg-7534	246	3	-	-	PUNCT
fuelectenerg-7534	246	4	off	off	NOUN
fuelectenerg-7534	246	5	is	be	AUX
fuelectenerg-7534	246	6	due	due	ADJ
fuelectenerg-7534	246	7	to	to	ADP
fuelectenerg-7534	246	8	the	the	DET
fuelectenerg-7534	246	9	need	need	NOUN
fuelectenerg-7534	246	10	of	of	ADP
fuelectenerg-7534	246	11	effective	effective	ADJ
fuelectenerg-7534	246	12	modeling	modeling	NOUN
fuelectenerg-7534	246	13	,	,	PUNCT
fuelectenerg-7534	246	14	design	design	NOUN
fuelectenerg-7534	246	15	and	and	CCONJ
fuelectenerg-7534	246	16	matching	matching	NOUN
fuelectenerg-7534	246	17	of	of	ADP
fuelectenerg-7534	246	18	the	the	DET
fuelectenerg-7534	246	19	coupler	coupler	NOUN
fuelectenerg-7534	246	20	and	and	CCONJ
fuelectenerg-7534	246	21	of	of	ADP
fuelectenerg-7534	246	22	the	the	DET
fuelectenerg-7534	246	23	reflective	reflective	ADJ
fuelectenerg-7534	246	24	load	load	NOUN
fuelectenerg-7534	246	25	.	.	PUNCT
fuelectenerg-7534	247	1	as	as	SCONJ
fuelectenerg-7534	247	2	highlighted	highlight	VERB
fuelectenerg-7534	247	3	in	in	ADP
fuelectenerg-7534	247	4	[	[	X
fuelectenerg-7534	247	5	65	65	NUM
fuelectenerg-7534	247	6	]	]	PUNCT
fuelectenerg-7534	247	7	,	,	PUNCT
fuelectenerg-7534	247	8	although	although	SCONJ
fuelectenerg-7534	247	9	phase	phase	NOUN
fuelectenerg-7534	247	10	shifters	shifter	NOUN
fuelectenerg-7534	247	11	based	base	VERB
fuelectenerg-7534	247	12	on	on	ADP
fuelectenerg-7534	247	13	rf	rf	NOUN
fuelectenerg-7534	247	14	-	-	PUNCT
fuelectenerg-7534	247	15	mems	mem	NOUN
fuelectenerg-7534	247	16	represented	represent	VERB
fuelectenerg-7534	247	17	a	a	DET
fuelectenerg-7534	247	18	powerful	powerful	ADJ
fuelectenerg-7534	247	19	solution	solution	NOUN
fuelectenerg-7534	247	20	to	to	PART
fuelectenerg-7534	247	21	simplify	simplify	VERB
fuelectenerg-7534	247	22	the	the	DET
fuelectenerg-7534	247	23	architecture	architecture	NOUN
fuelectenerg-7534	247	24	of	of	ADP
fuelectenerg-7534	247	25	phased	phase	VERB
fuelectenerg-7534	247	26	arrays	array	NOUN
fuelectenerg-7534	247	27	,	,	PUNCT
fuelectenerg-7534	247	28	some	some	DET
fuelectenerg-7534	247	29	substantial	substantial	ADJ
fuelectenerg-7534	247	30	improvements	improvement	NOUN
fuelectenerg-7534	247	31	were	be	AUX
fuelectenerg-7534	247	32	mandatory	mandatory	ADJ
fuelectenerg-7534	247	33	at	at	ADP
fuelectenerg-7534	247	34	that	that	DET
fuelectenerg-7534	247	35	time	time	NOUN
fuelectenerg-7534	247	36	.	.	PUNCT
fuelectenerg-7534	248	1	the	the	DET
fuelectenerg-7534	248	2	main	main	ADJ
fuelectenerg-7534	248	3	requirement	requirement	NOUN
fuelectenerg-7534	248	4	was	be	AUX
fuelectenerg-7534	248	5	a	a	DET
fuelectenerg-7534	248	6	general	general	ADJ
fuelectenerg-7534	248	7	reduction	reduction	NOUN
fuelectenerg-7534	248	8	of	of	ADP
fuelectenerg-7534	248	9	the	the	DET
fuelectenerg-7534	248	10	physical	physical	ADJ
fuelectenerg-7534	248	11	footprint	footprint	NOUN
fuelectenerg-7534	248	12	.	.	PUNCT
fuelectenerg-7534	249	1	other	other	ADJ
fuelectenerg-7534	249	2	concerns	concern	NOUN
fuelectenerg-7534	249	3	were	be	AUX
fuelectenerg-7534	249	4	mostly	mostly	ADV
fuelectenerg-7534	249	5	related	relate	VERB
fuelectenerg-7534	249	6	to	to	ADP
fuelectenerg-7534	249	7	the	the	DET
fuelectenerg-7534	249	8	employed	employ	VERB
fuelectenerg-7534	249	9	switching	switch	VERB
fuelectenerg-7534	249	10	units	unit	NOUN
fuelectenerg-7534	249	11	within	within	ADP
fuelectenerg-7534	249	12	the	the	DET
fuelectenerg-7534	249	13	phase	phase	NOUN
fuelectenerg-7534	249	14	shifters	shifter	NOUN
fuelectenerg-7534	249	15	,	,	PUNCT
fuelectenerg-7534	249	16	the	the	DET
fuelectenerg-7534	249	17	most	most	ADV
fuelectenerg-7534	249	18	relevant	relevant	ADJ
fuelectenerg-7534	249	19	ones	one	NOUN
fuelectenerg-7534	249	20	being	be	AUX
fuelectenerg-7534	249	21	limited	limited	ADJ
fuelectenerg-7534	249	22	reliability	reliability	NOUN
fuelectenerg-7534	249	23	,	,	PUNCT
fuelectenerg-7534	249	24	high	high	ADJ
fuelectenerg-7534	249	25	switching	switching	NOUN
fuelectenerg-7534	249	26	time	time	NOUN
fuelectenerg-7534	249	27	and	and	CCONJ
fuelectenerg-7534	249	28	limited	limited	ADJ
fuelectenerg-7534	249	29	power	power	NOUN
fuelectenerg-7534	249	30	handling	handling	NOUN
fuelectenerg-7534	249	31	capabilities	capability	NOUN
fuelectenerg-7534	249	32	.	.	PUNCT
fuelectenerg-7534	250	1	these	these	DET
fuelectenerg-7534	250	2	factors	factor	NOUN
fuelectenerg-7534	250	3	confined	confine	VERB
fuelectenerg-7534	250	4	early	early	ADJ
fuelectenerg-7534	250	5	rfmems	rfmem	NOUN
fuelectenerg-7534	250	6	phase	phase	NOUN
fuelectenerg-7534	250	7	shifters	shifter	NOUN
fuelectenerg-7534	250	8	to	to	PART
fuelectenerg-7534	250	9	arrays	array	VERB
fuelectenerg-7534	250	10	with	with	ADP
fuelectenerg-7534	250	11	relatively	relatively	ADV
fuelectenerg-7534	250	12	slow	slow	ADJ
fuelectenerg-7534	250	13	scanning	scanning	NOUN
fuelectenerg-7534	250	14	and	and	CCONJ
fuelectenerg-7534	250	15	radiated	radiated	ADJ
fuelectenerg-7534	250	16	power	power	NOUN
fuelectenerg-7534	250	17	,	,	PUNCT
fuelectenerg-7534	250	18	while	while	SCONJ
fuelectenerg-7534	250	19	the	the	DET
fuelectenerg-7534	250	20	physical	physical	ADJ
fuelectenerg-7534	250	21	size	size	NOUN
fuelectenerg-7534	250	22	prevented	prevent	VERB
fuelectenerg-7534	250	23	the	the	DET
fuelectenerg-7534	250	24	integration	integration	NOUN
fuelectenerg-7534	250	25	in	in	ADP
fuelectenerg-7534	250	26	case	case	NOUN
fuelectenerg-7534	250	27	low	low	ADJ
fuelectenerg-7534	250	28	microwave	microwave	NOUN
fuelectenerg-7534	250	29	frequencies	frequency	NOUN
fuelectenerg-7534	250	30	were	be	AUX
fuelectenerg-7534	250	31	at	at	ADP
fuelectenerg-7534	250	32	stake	stake	NOUN
fuelectenerg-7534	250	33	(	(	PUNCT
fuelectenerg-7534	250	34	<	<	X
fuelectenerg-7534	250	35	20	20	NUM
fuelectenerg-7534	250	36	ghz	ghz	NOUN
fuelectenerg-7534	250	37	)	)	PUNCT
fuelectenerg-7534	250	38	.	.	PUNCT
fuelectenerg-7534	251	1	many	many	ADJ
fuelectenerg-7534	251	2	research	research	NOUN
fuelectenerg-7534	251	3	solutions	solution	NOUN
fuelectenerg-7534	251	4	of	of	ADP
fuelectenerg-7534	251	5	the	the	DET
fuelectenerg-7534	251	6	last	last	ADJ
fuelectenerg-7534	251	7	decade	decade	NOUN
fuelectenerg-7534	251	8	remarkably	remarkably	ADV
fuelectenerg-7534	251	9	faced	face	VERB
fuelectenerg-7534	251	10	the	the	DET
fuelectenerg-7534	251	11	challenge	challenge	NOUN
fuelectenerg-7534	251	12	of	of	ADP
fuelectenerg-7534	251	13	increasing	increase	VERB
fuelectenerg-7534	251	14	the	the	DET
fuelectenerg-7534	251	15	shifting	shift	VERB
fuelectenerg-7534	251	16	range	range	NOUN
fuelectenerg-7534	251	17	and	and	CCONJ
fuelectenerg-7534	251	18	phase	phase	NOUN
fuelectenerg-7534	251	19	precision	precision	NOUN
fuelectenerg-7534	251	20	,	,	PUNCT
fuelectenerg-7534	251	21	and	and	CCONJ
fuelectenerg-7534	251	22	considerable	considerable	ADJ
fuelectenerg-7534	251	23	steps	step	NOUN
fuelectenerg-7534	251	24	ahead	ahead	ADV
fuelectenerg-7534	251	25	have	have	AUX
fuelectenerg-7534	251	26	been	be	AUX
fuelectenerg-7534	251	27	made	make	VERB
fuelectenerg-7534	251	28	in	in	ADP
fuelectenerg-7534	251	29	the	the	DET
fuelectenerg-7534	251	30	direction	direction	NOUN
fuelectenerg-7534	251	31	of	of	ADP
fuelectenerg-7534	251	32	miniaturization	miniaturization	NOUN
fuelectenerg-7534	251	33	,	,	PUNCT
fuelectenerg-7534	251	34	still	still	ADV
fuelectenerg-7534	251	35	lowering	lower	VERB
fuelectenerg-7534	251	36	insertion	insertion	NOUN
fuelectenerg-7534	251	37	loss	loss	NOUN
fuelectenerg-7534	251	38	.	.	PUNCT
fuelectenerg-7534	252	1	tables	table	NOUN
fuelectenerg-7534	252	2	4	4	NUM
fuelectenerg-7534	252	3	and	and	CCONJ
fuelectenerg-7534	252	4	5	5	NUM
fuelectenerg-7534	252	5	are	be	AUX
fuelectenerg-7534	252	6	provided	provide	VERB
fuelectenerg-7534	252	7	along	along	ADP
fuelectenerg-7534	252	8	the	the	DET
fuelectenerg-7534	252	9	present	present	ADJ
fuelectenerg-7534	252	10	section	section	NOUN
fuelectenerg-7534	252	11	for	for	ADP
fuelectenerg-7534	252	12	a	a	DET
fuelectenerg-7534	252	13	better	well	ADJ
fuelectenerg-7534	252	14	comparison	comparison	NOUN
fuelectenerg-7534	252	15	of	of	ADP
fuelectenerg-7534	252	16	the	the	DET
fuelectenerg-7534	252	17	discussed	discuss	VERB
fuelectenerg-7534	252	18	research	research	NOUN
fuelectenerg-7534	252	19	items	item	NOUN
fuelectenerg-7534	252	20	in	in	ADP
fuelectenerg-7534	252	21	terms	term	NOUN
fuelectenerg-7534	252	22	of	of	ADP
fuelectenerg-7534	252	23	their	their	PRON
fuelectenerg-7534	252	24	characteristics	characteristic	NOUN
fuelectenerg-7534	252	25	.	.	PUNCT
fuelectenerg-7534	253	1	4.1	4.1	NUM
fuelectenerg-7534	253	2	.	.	PUNCT
fuelectenerg-7534	254	1	switched	switch	VERB
fuelectenerg-7534	254	2	-	-	PUNCT
fuelectenerg-7534	254	3	line	line	NOUN
fuelectenerg-7534	254	4	concerning	concern	VERB
fuelectenerg-7534	254	5	switched	switch	VERB
fuelectenerg-7534	254	6	-	-	PUNCT
fuelectenerg-7534	254	7	line	line	NOUN
fuelectenerg-7534	254	8	topologies	topology	NOUN
fuelectenerg-7534	254	9	of	of	ADP
fuelectenerg-7534	254	10	rf	rf	ADJ
fuelectenerg-7534	254	11	-	-	PUNCT
fuelectenerg-7534	254	12	mems	mems	ADJ
fuelectenerg-7534	254	13	phase	phase	NOUN
fuelectenerg-7534	254	14	shifters	shifter	NOUN
fuelectenerg-7534	254	15	,	,	PUNCT
fuelectenerg-7534	254	16	some	some	DET
fuelectenerg-7534	254	17	relevant	relevant	ADJ
fuelectenerg-7534	254	18	contributions	contribution	NOUN
fuelectenerg-7534	254	19	are	be	AUX
fuelectenerg-7534	254	20	reported	report	VERB
fuelectenerg-7534	254	21	in	in	ADP
fuelectenerg-7534	254	22	[	[	PRON
fuelectenerg-7534	254	23	66][67][68	66][67][68	NOUN
fuelectenerg-7534	254	24	]	]	X
fuelectenerg-7534	254	25	.	.	PUNCT
fuelectenerg-7534	255	1	in	in	ADP
fuelectenerg-7534	255	2	particular	particular	ADJ
fuelectenerg-7534	255	3	,	,	PUNCT
fuelectenerg-7534	255	4	the	the	DET
fuelectenerg-7534	255	5	device	device	NOUN
fuelectenerg-7534	255	6	presented	present	VERB
fuelectenerg-7534	255	7	in	in	ADP
fuelectenerg-7534	255	8	[	[	X
fuelectenerg-7534	255	9	66	66	NUM
fuelectenerg-7534	255	10	]	]	PUNCT
fuelectenerg-7534	255	11	and	and	CCONJ
fuelectenerg-7534	255	12	shown	show	VERB
fuelectenerg-7534	255	13	in	in	ADP
fuelectenerg-7534	255	14	figure	figure	NOUN
fuelectenerg-7534	255	15	5a	5a	NUM
fuelectenerg-7534	255	16	has	have	VERB
fuelectenerg-7534	255	17	a	a	DET
fuelectenerg-7534	255	18	wide	wide	ADJ
fuelectenerg-7534	255	19	shifting	shift	VERB
fuelectenerg-7534	255	20	range	range	NOUN
fuelectenerg-7534	255	21	and	and	CCONJ
fuelectenerg-7534	255	22	remarkable	remarkable	ADJ
fuelectenerg-7534	255	23	power	power	NOUN
fuelectenerg-7534	255	24	handling	handling	NOUN
fuelectenerg-7534	255	25	capabilities	capability	NOUN
fuelectenerg-7534	255	26	(	(	PUNCT
fuelectenerg-7534	255	27	5	5	NUM
fuelectenerg-7534	255	28	w	w	NOUN
fuelectenerg-7534	255	29	)	)	PUNCT
fuelectenerg-7534	255	30	,	,	PUNCT
fuelectenerg-7534	255	31	at	at	ADP
fuelectenerg-7534	255	32	the	the	DET
fuelectenerg-7534	255	33	expense	expense	NOUN
fuelectenerg-7534	255	34	of	of	ADP
fuelectenerg-7534	255	35	losses	loss	NOUN
fuelectenerg-7534	255	36	(	(	PUNCT
fuelectenerg-7534	255	37	-3.1	-3.1	NOUN
fuelectenerg-7534	255	38	db	db	PROPN
fuelectenerg-7534	255	39	insertion	insertion	NOUN
fuelectenerg-7534	255	40	loss	loss	NOUN
fuelectenerg-7534	255	41	)	)	PUNCT
fuelectenerg-7534	255	42	and	and	CCONJ
fuelectenerg-7534	255	43	footprint	footprint	NOUN
fuelectenerg-7534	255	44	(	(	PUNCT
fuelectenerg-7534	255	45	7.5x6	7.5x6	NUM
fuelectenerg-7534	255	46	mm2	mm2	NOUN
fuelectenerg-7534	255	47	)	)	PUNCT
fuelectenerg-7534	255	48	.	.	PUNCT
fuelectenerg-7534	256	1	the	the	DET
fuelectenerg-7534	256	2	employed	employ	VERB
fuelectenerg-7534	256	3	sp2	sp2	NOUN
fuelectenerg-7534	256	4	t	t	PROPN
fuelectenerg-7534	256	5	and	and	CCONJ
fuelectenerg-7534	256	6	sp4	sp4	PROPN
fuelectenerg-7534	256	7	t	t	PROPN
fuelectenerg-7534	256	8	switches	switch	NOUN
fuelectenerg-7534	256	9	demonstrated	demonstrate	VERB
fuelectenerg-7534	256	10	very	very	ADV
fuelectenerg-7534	256	11	limited	limited	ADJ
fuelectenerg-7534	256	12	switching	switching	NOUN
fuelectenerg-7534	256	13	time	time	NOUN
fuelectenerg-7534	256	14	(	(	PUNCT
fuelectenerg-7534	256	15	5	5	NUM
fuelectenerg-7534	256	16	μs	μs	NOUN
fuelectenerg-7534	256	17	)	)	PUNCT
fuelectenerg-7534	256	18	and	and	CCONJ
fuelectenerg-7534	256	19	high	high	ADJ
fuelectenerg-7534	256	20	reliability	reliability	NOUN
fuelectenerg-7534	256	21	(	(	PUNCT
fuelectenerg-7534	256	22	100	100	NUM
fuelectenerg-7534	256	23	m	m	NOUN
fuelectenerg-7534	256	24	cycles	cycle	NOUN
fuelectenerg-7534	256	25	)	)	PUNCT
fuelectenerg-7534	256	26	,	,	PUNCT
fuelectenerg-7534	256	27	despite	despite	SCONJ
fuelectenerg-7534	256	28	a	a	DET
fuelectenerg-7534	256	29	rather	rather	ADV
fuelectenerg-7534	256	30	high	high	ADJ
fuelectenerg-7534	256	31	actuation	actuation	NOUN
fuelectenerg-7534	256	32	voltage	voltage	NOUN
fuelectenerg-7534	256	33	of	of	ADP
fuelectenerg-7534	256	34	90	90	NUM
fuelectenerg-7534	256	35	v.	v.	CCONJ
fuelectenerg-7534	256	36	since	since	SCONJ
fuelectenerg-7534	256	37	both	both	DET
fuelectenerg-7534	256	38	[	[	X
fuelectenerg-7534	256	39	67][68	67][68	X
fuelectenerg-7534	256	40	]	]	X
fuelectenerg-7534	256	41	propose	propose	VERB
fuelectenerg-7534	256	42	1	1	NUM
fuelectenerg-7534	256	43	-	-	PUNCT
fuelectenerg-7534	256	44	bit	bit	NOUN
fuelectenerg-7534	256	45	180	180	NUM
fuelectenerg-7534	256	46	°	°	NOUN
fuelectenerg-7534	256	47	phase	phase	NOUN
fuelectenerg-7534	256	48	shifters	shifter	NOUN
fuelectenerg-7534	256	49	,	,	PUNCT
fuelectenerg-7534	256	50	their	their	PRON
fuelectenerg-7534	256	51	intrinsic	intrinsic	ADJ
fuelectenerg-7534	256	52	simplicity	simplicity	NOUN
fuelectenerg-7534	256	53	allows	allow	VERB
fuelectenerg-7534	256	54	more	more	ADV
fuelectenerg-7534	256	55	appreciable	appreciable	ADJ
fuelectenerg-7534	256	56	losses	loss	NOUN
fuelectenerg-7534	256	57	and	and	CCONJ
fuelectenerg-7534	256	58	area	area	NOUN
fuelectenerg-7534	256	59	(	(	PUNCT
fuelectenerg-7534	256	60	9	9	NUM
fuelectenerg-7534	256	61	and	and	CCONJ
fuelectenerg-7534	256	62	15	15	NUM
fuelectenerg-7534	256	63	mm2	mm2	NOUN
fuelectenerg-7534	256	64	)	)	PUNCT
fuelectenerg-7534	256	65	.	.	PUNCT
fuelectenerg-7534	257	1	additional	additional	ADJ
fuelectenerg-7534	257	2	suggestions	suggestion	NOUN
fuelectenerg-7534	257	3	are	be	AUX
fuelectenerg-7534	257	4	offered	offer	VERB
fuelectenerg-7534	257	5	by	by	ADP
fuelectenerg-7534	257	6	[	[	X
fuelectenerg-7534	257	7	69][70][71][72	69][70][71][72	NUM
fuelectenerg-7534	257	8	]	]	X
fuelectenerg-7534	257	9	.	.	PUNCT
fuelectenerg-7534	258	1	in	in	ADP
fuelectenerg-7534	258	2	particular	particular	ADJ
fuelectenerg-7534	258	3	,	,	PUNCT
fuelectenerg-7534	258	4	[	[	X
fuelectenerg-7534	258	5	69	69	NUM
fuelectenerg-7534	258	6	]	]	PUNCT
fuelectenerg-7534	258	7	suggests	suggest	VERB
fuelectenerg-7534	258	8	a	a	DET
fuelectenerg-7534	258	9	4	4	NUM
fuelectenerg-7534	258	10	-	-	PUNCT
fuelectenerg-7534	258	11	bit	bit	NOUN
fuelectenerg-7534	258	12	phase	phase	NOUN
fuelectenerg-7534	258	13	shifter	shifter	NOUN
fuelectenerg-7534	258	14	for	for	ADP
fuelectenerg-7534	258	15	lte	lte	PROPN
fuelectenerg-7534	258	16	base	base	PROPN
fuelectenerg-7534	258	17	station	station	NOUN
fuelectenerg-7534	258	18	,	,	PUNCT
fuelectenerg-7534	258	19	fabricated	fabricate	VERB
fuelectenerg-7534	258	20	on	on	ADP
fuelectenerg-7534	258	21	common	common	ADJ
fuelectenerg-7534	258	22	pcb	pcb	NOUN
fuelectenerg-7534	258	23	substrate	substrate	NOUN
fuelectenerg-7534	258	24	.	.	PUNCT
fuelectenerg-7534	259	1	the	the	DET
fuelectenerg-7534	259	2	path	path	NOUN
fuelectenerg-7534	259	3	from	from	ADP
fuelectenerg-7534	259	4	the	the	DET
fuelectenerg-7534	259	5	input	input	NOUN
fuelectenerg-7534	259	6	to	to	ADP
fuelectenerg-7534	259	7	the	the	DET
fuelectenerg-7534	259	8	output	output	NOUN
fuelectenerg-7534	259	9	port	port	NOUN
fuelectenerg-7534	259	10	is	be	AUX
fuelectenerg-7534	259	11	composed	compose	VERB
fuelectenerg-7534	259	12	by	by	ADP
fuelectenerg-7534	259	13	two	two	NUM
fuelectenerg-7534	259	14	sections	section	NOUN
fuelectenerg-7534	259	15	,	,	PUNCT
fuelectenerg-7534	259	16	each	each	DET
fuelectenerg-7534	259	17	one	one	NOUN
fuelectenerg-7534	259	18	provided	provide	VERB
fuelectenerg-7534	259	19	with	with	ADP
fuelectenerg-7534	259	20	four	four	NUM
fuelectenerg-7534	259	21	paths	path	NOUN
fuelectenerg-7534	259	22	of	of	ADP
fuelectenerg-7534	259	23	different	different	ADJ
fuelectenerg-7534	259	24	electric	electric	ADJ
fuelectenerg-7534	259	25	length	length	NOUN
fuelectenerg-7534	259	26	,	,	PUNCT
fuelectenerg-7534	259	27	as	as	SCONJ
fuelectenerg-7534	259	28	depicted	depict	VERB
fuelectenerg-7534	259	29	in	in	ADP
fuelectenerg-7534	259	30	the	the	DET
fuelectenerg-7534	259	31	block	block	NOUN
fuelectenerg-7534	259	32	scheme	scheme	NOUN
fuelectenerg-7534	259	33	of	of	ADP
fuelectenerg-7534	259	34	figure	figure	NOUN
fuelectenerg-7534	259	35	5b	5b	NOUN
fuelectenerg-7534	259	36	.	.	PUNCT
fuelectenerg-7534	260	1	the	the	DET
fuelectenerg-7534	260	2	switching	switching	NOUN
fuelectenerg-7534	260	3	is	be	AUX
fuelectenerg-7534	260	4	performed	perform	VERB
fuelectenerg-7534	260	5	by	by	ADP
fuelectenerg-7534	260	6	two	two	NUM
fuelectenerg-7534	260	7	spdt	spdt	NOUN
fuelectenerg-7534	260	8	on	on	ADP
fuelectenerg-7534	260	9	both	both	DET
fuelectenerg-7534	260	10	sides	side	NOUN
fuelectenerg-7534	260	11	of	of	ADP
fuelectenerg-7534	260	12	a	a	DET
fuelectenerg-7534	260	13	section	section	NOUN
fuelectenerg-7534	260	14	,	,	PUNCT
fuelectenerg-7534	260	15	actuated	actuate	VERB
fuelectenerg-7534	260	16	by	by	ADP
fuelectenerg-7534	260	17	90	90	NUM
fuelectenerg-7534	260	18	v	v	NOUN
fuelectenerg-7534	260	19	signal	signal	NOUN
fuelectenerg-7534	260	20	in	in	ADP
fuelectenerg-7534	260	21	10	10	NUM
fuelectenerg-7534	260	22	μs	μs	NOUN
fuelectenerg-7534	260	23	.	.	PUNCT
fuelectenerg-7534	261	1	a	a	DET
fuelectenerg-7534	261	2	5	5	NUM
fuelectenerg-7534	261	3	-	-	PUNCT
fuelectenerg-7534	261	4	bit	bit	NOUN
fuelectenerg-7534	261	5	architecture	architecture	NOUN
fuelectenerg-7534	261	6	focused	focus	VERB
fuelectenerg-7534	261	7	on	on	ADP
fuelectenerg-7534	261	8	ku	ku	PROPN
fuelectenerg-7534	261	9	band	band	NOUN
fuelectenerg-7534	261	10	is	be	AUX
fuelectenerg-7534	261	11	described	describe	VERB
fuelectenerg-7534	261	12	in	in	ADP
fuelectenerg-7534	261	13	[	[	X
fuelectenerg-7534	261	14	70	70	NUM
fuelectenerg-7534	261	15	]	]	PUNCT
fuelectenerg-7534	261	16	.	.	PUNCT
fuelectenerg-7534	262	1	as	as	SCONJ
fuelectenerg-7534	262	2	reported	report	VERB
fuelectenerg-7534	262	3	in	in	ADP
fuelectenerg-7534	262	4	figure	figure	NOUN
fuelectenerg-7534	262	5	5c	5c	NOUN
fuelectenerg-7534	262	6	,	,	PUNCT
fuelectenerg-7534	262	7	out	out	ADP
fuelectenerg-7534	262	8	of	of	ADP
fuelectenerg-7534	262	9	the	the	DET
fuelectenerg-7534	262	10	three	three	NUM
fuelectenerg-7534	262	11	sections	section	NOUN
fuelectenerg-7534	262	12	in	in	ADP
fuelectenerg-7534	262	13	which	which	PRON
fuelectenerg-7534	262	14	the	the	DET
fuelectenerg-7534	262	15	device	device	NOUN
fuelectenerg-7534	262	16	is	be	AUX
fuelectenerg-7534	262	17	divided	divide	VERB
fuelectenerg-7534	262	18	,	,	PUNCT
fuelectenerg-7534	262	19	two	two	NUM
fuelectenerg-7534	262	20	are	be	AUX
fuelectenerg-7534	262	21	characterized	characterize	VERB
fuelectenerg-7534	262	22	by	by	ADP
fuelectenerg-7534	262	23	four	four	NUM
fuelectenerg-7534	262	24	paths	path	NOUN
fuelectenerg-7534	262	25	with	with	ADP
fuelectenerg-7534	262	26	different	different	ADJ
fuelectenerg-7534	262	27	electrical	electrical	ADJ
fuelectenerg-7534	262	28	length	length	NOUN
fuelectenerg-7534	262	29	selected	select	VERB
fuelectenerg-7534	262	30	by	by	ADP
fuelectenerg-7534	262	31	a	a	DET
fuelectenerg-7534	262	32	sp4	sp4	NOUN
fuelectenerg-7534	262	33	t	t	PROPN
fuelectenerg-7534	262	34	switch	switch	NOUN
fuelectenerg-7534	262	35	on	on	ADP
fuelectenerg-7534	262	36	each	each	DET
fuelectenerg-7534	262	37	side	side	NOUN
fuelectenerg-7534	262	38	.	.	PUNCT
fuelectenerg-7534	263	1	the	the	DET
fuelectenerg-7534	263	2	remaining	remain	VERB
fuelectenerg-7534	263	3	section	section	NOUN
fuelectenerg-7534	263	4	contains	contain	VERB
fuelectenerg-7534	263	5	just	just	ADV
fuelectenerg-7534	263	6	two	two	NUM
fuelectenerg-7534	263	7	paths	path	NOUN
fuelectenerg-7534	263	8	,	,	PUNCT
fuelectenerg-7534	263	9	selected	select	VERB
fuelectenerg-7534	263	10	by	by	ADP
fuelectenerg-7534	263	11	a	a	DET
fuelectenerg-7534	263	12	couple	couple	NOUN
fuelectenerg-7534	263	13	of	of	ADP
fuelectenerg-7534	263	14	sp2	sp2	NOUN
fuelectenerg-7534	263	15	t	t	PROPN
fuelectenerg-7534	263	16	switches	switch	NOUN
fuelectenerg-7534	263	17	.	.	PUNCT
fuelectenerg-7534	264	1	by	by	ADP
fuelectenerg-7534	264	2	applying	apply	VERB
fuelectenerg-7534	264	3	53	53	NUM
fuelectenerg-7534	264	4	v	v	ADP
fuelectenerg-7534	264	5	pull	pull	NOUN
fuelectenerg-7534	264	6	-	-	PUNCT
fuelectenerg-7534	264	7	in	in	ADP
fuelectenerg-7534	264	8	voltage	voltage	NOUN
fuelectenerg-7534	264	9	,	,	PUNCT
fuelectenerg-7534	264	10	switch	switch	NOUN
fuelectenerg-7534	264	11	-	-	PUNCT
fuelectenerg-7534	264	12	on	on	ADP
fuelectenerg-7534	264	13	time	time	NOUN
fuelectenerg-7534	264	14	is	be	AUX
fuelectenerg-7534	264	15	28	28	NUM
fuelectenerg-7534	264	16	μs	μs	NOUN
fuelectenerg-7534	264	17	for	for	ADP
fuelectenerg-7534	264	18	both	both	DET
fuelectenerg-7534	264	19	kinds	kind	NOUN
fuelectenerg-7534	264	20	of	of	ADP
fuelectenerg-7534	264	21	micro	micro	NOUN
fuelectenerg-7534	264	22	-	-	NOUN
fuelectenerg-7534	264	23	relays	relay	NOUN
fuelectenerg-7534	264	24	.	.	PUNCT
fuelectenerg-7534	265	1	the	the	DET
fuelectenerg-7534	265	2	overall	overall	ADJ
fuelectenerg-7534	265	3	area	area	NOUN
fuelectenerg-7534	265	4	of	of	ADP
fuelectenerg-7534	265	5	the	the	DET
fuelectenerg-7534	265	6	device	device	NOUN
fuelectenerg-7534	265	7	is	be	AUX
fuelectenerg-7534	265	8	3.19x5.17	3.19x5.17	PROPN
fuelectenerg-7534	265	9	mm2	mm2	NOUN
fuelectenerg-7534	265	10	.	.	PUNCT
fuelectenerg-7534	266	1	in	in	ADP
fuelectenerg-7534	266	2	case	case	NOUN
fuelectenerg-7534	266	3	of	of	ADP
fuelectenerg-7534	266	4	both	both	CCONJ
fuelectenerg-7534	266	5	cold	cold	ADJ
fuelectenerg-7534	266	6	and	and	CCONJ
fuelectenerg-7534	266	7	hot	hot	ADJ
fuelectenerg-7534	266	8	switching	switching	NOUN
fuelectenerg-7534	266	9	conditions	condition	NOUN
fuelectenerg-7534	266	10	,	,	PUNCT
fuelectenerg-7534	266	11	the	the	DET
fuelectenerg-7534	266	12	device	device	NOUN
fuelectenerg-7534	266	13	has	have	AUX
fuelectenerg-7534	266	14	been	be	AUX
fuelectenerg-7534	266	15	demonstrated	demonstrate	VERB
fuelectenerg-7534	266	16	with	with	ADP
fuelectenerg-7534	266	17	more	more	ADJ
fuelectenerg-7534	266	18	than	than	ADP
fuelectenerg-7534	266	19	10	10	NUM
fuelectenerg-7534	266	20	million	million	NUM
fuelectenerg-7534	266	21	cycles	cycle	NOUN
fuelectenerg-7534	266	22	from	from	ADP
fuelectenerg-7534	266	23	0.1	0.1	NUM
fuelectenerg-7534	266	24	to	to	PART
fuelectenerg-7534	266	25	1	1	NUM
fuelectenerg-7534	266	26	w	w	NOUN
fuelectenerg-7534	266	27	of	of	ADP
fuelectenerg-7534	266	28	rf	rf	NOUN
fuelectenerg-7534	266	29	power	power	NOUN
fuelectenerg-7534	266	30	.	.	PUNCT
fuelectenerg-7534	267	1	the	the	DET
fuelectenerg-7534	267	2	3	3	NUM
fuelectenerg-7534	267	3	-	-	PUNCT
fuelectenerg-7534	267	4	bit	bit	NOUN
fuelectenerg-7534	267	5	device	device	NOUN
fuelectenerg-7534	267	6	reported	report	VERB
fuelectenerg-7534	267	7	in	in	ADP
fuelectenerg-7534	267	8	[	[	X
fuelectenerg-7534	267	9	71	71	NUM
fuelectenerg-7534	267	10	]	]	PUNCT
fuelectenerg-7534	267	11	has	have	AUX
fuelectenerg-7534	267	12	been	be	AUX
fuelectenerg-7534	267	13	characterized	characterize	VERB
fuelectenerg-7534	267	14	in	in	ADP
fuelectenerg-7534	267	15	the	the	DET
fuelectenerg-7534	267	16	ka	ka	PROPN
fuelectenerg-7534	267	17	band	band	PROPN
fuelectenerg-7534	267	18	,	,	PUNCT
fuelectenerg-7534	267	19	and	and	CCONJ
fuelectenerg-7534	267	20	it	it	PRON
fuelectenerg-7534	267	21	is	be	AUX
fuelectenerg-7534	267	22	composed	compose	VERB
fuelectenerg-7534	267	23	by	by	ADP
fuelectenerg-7534	267	24	two	two	NUM
fuelectenerg-7534	267	25	sp8	sp8	PROPN
fuelectenerg-7534	267	26	t	t	PROPN
fuelectenerg-7534	267	27	switches	switch	NOUN
fuelectenerg-7534	267	28	selecting	select	VERB
fuelectenerg-7534	267	29	one	one	NUM
fuelectenerg-7534	267	30	output	output	NOUN
fuelectenerg-7534	267	31	of	of	ADP
fuelectenerg-7534	267	32	the	the	DET
fuelectenerg-7534	267	33	available	available	ADJ
fuelectenerg-7534	267	34	eight	eight	NUM
fuelectenerg-7534	267	35	signal	signal	NOUN
fuelectenerg-7534	267	36	paths	path	NOUN
fuelectenerg-7534	267	37	.	.	PUNCT
fuelectenerg-7534	268	1	with	with	ADP
fuelectenerg-7534	268	2	a	a	DET
fuelectenerg-7534	268	3	total	total	ADJ
fuelectenerg-7534	268	4	area	area	NOUN
fuelectenerg-7534	268	5	of	of	ADP
fuelectenerg-7534	268	6	5.9	5.9	NUM
fuelectenerg-7534	268	7	mm2	mm2	NOUN
fuelectenerg-7534	268	8	,	,	PUNCT
fuelectenerg-7534	268	9	this	this	DET
fuelectenerg-7534	268	10	phase	phase	NOUN
fuelectenerg-7534	268	11	shifter	shifter	NOUN
fuelectenerg-7534	268	12	based	base	VERB
fuelectenerg-7534	268	13	on	on	ADP
fuelectenerg-7534	268	14	alumina	alumina	NOUN
fuelectenerg-7534	268	15	substrate	substrate	NOUN
fuelectenerg-7534	268	16	employs	employ	VERB
fuelectenerg-7534	268	17	a	a	DET
fuelectenerg-7534	268	18	comprehensive	comprehensive	ADJ
fuelectenerg-7534	268	19	overview	overview	NOUN
fuelectenerg-7534	268	20	of	of	ADP
fuelectenerg-7534	268	21	recent	recent	ADJ
fuelectenerg-7534	268	22	developments	development	NOUN
fuelectenerg-7534	268	23	in	in	ADP
fuelectenerg-7534	268	24	rf	rf	ADJ
fuelectenerg-7534	268	25	-	-	PUNCT
fuelectenerg-7534	268	26	mems	mems	ADJ
fuelectenerg-7534	268	27	technology	technology	NOUN
fuelectenerg-7534	268	28	347	347	NUM
fuelectenerg-7534	268	29	switches	switch	NOUN
fuelectenerg-7534	268	30	with	with	ADP
fuelectenerg-7534	268	31	actuation	actuation	NOUN
fuelectenerg-7534	268	32	at	at	ADP
fuelectenerg-7534	268	33	65	65	NUM
fuelectenerg-7534	268	34	v.	v.	ADP
fuelectenerg-7534	268	35	reliability	reliability	NOUN
fuelectenerg-7534	268	36	measurements	measurement	NOUN
fuelectenerg-7534	268	37	at	at	ADP
fuelectenerg-7534	268	38	room	room	NOUN
fuelectenerg-7534	268	39	temperature	temperature	NOUN
fuelectenerg-7534	268	40	reported	report	VERB
fuelectenerg-7534	268	41	a	a	DET
fuelectenerg-7534	268	42	satisfactory	satisfactory	ADJ
fuelectenerg-7534	268	43	behavior	behavior	NOUN
fuelectenerg-7534	268	44	beyond	beyond	ADP
fuelectenerg-7534	268	45	100	100	NUM
fuelectenerg-7534	268	46	million	million	NUM
fuelectenerg-7534	268	47	cycles	cycle	NOUN
fuelectenerg-7534	268	48	for	for	ADP
fuelectenerg-7534	268	49	the	the	DET
fuelectenerg-7534	268	50	range	range	NOUN
fuelectenerg-7534	268	51	of	of	ADP
fuelectenerg-7534	268	52	power	power	NOUN
fuelectenerg-7534	268	53	(	(	PUNCT
fuelectenerg-7534	268	54	0.1	0.1	NUM
fuelectenerg-7534	268	55	-	-	SYM
fuelectenerg-7534	268	56	1	1	NUM
fuelectenerg-7534	268	57	)	)	PUNCT
fuelectenerg-7534	268	58	w	w	NOUN
fuelectenerg-7534	268	59	,	,	PUNCT
fuelectenerg-7534	268	60	and	and	CCONJ
fuelectenerg-7534	268	61	beyond	beyond	ADP
fuelectenerg-7534	268	62	30	30	NUM
fuelectenerg-7534	268	63	million	million	NUM
fuelectenerg-7534	268	64	cycles	cycle	NOUN
fuelectenerg-7534	268	65	for	for	ADP
fuelectenerg-7534	268	66	2	2	NUM
fuelectenerg-7534	268	67	w	w	NOUN
fuelectenerg-7534	268	68	of	of	ADP
fuelectenerg-7534	268	69	rf	rf	NOUN
fuelectenerg-7534	268	70	power	power	NOUN
fuelectenerg-7534	268	71	.	.	PUNCT
fuelectenerg-7534	269	1	possible	possible	ADJ
fuelectenerg-7534	269	2	improvements	improvement	NOUN
fuelectenerg-7534	269	3	for	for	ADP
fuelectenerg-7534	269	4	the	the	DET
fuelectenerg-7534	269	5	two	two	NUM
fuelectenerg-7534	269	6	previous	previous	ADJ
fuelectenerg-7534	269	7	works	work	NOUN
fuelectenerg-7534	269	8	are	be	AUX
fuelectenerg-7534	269	9	reported	report	VERB
fuelectenerg-7534	269	10	in	in	ADP
fuelectenerg-7534	269	11	[	[	X
fuelectenerg-7534	269	12	72	72	NUM
fuelectenerg-7534	269	13	]	]	PUNCT
fuelectenerg-7534	269	14	,	,	PUNCT
fuelectenerg-7534	269	15	together	together	ADV
fuelectenerg-7534	269	16	with	with	ADP
fuelectenerg-7534	269	17	a	a	DET
fuelectenerg-7534	269	18	dmtl	dmtl	NOUN
fuelectenerg-7534	269	19	solution	solution	NOUN
fuelectenerg-7534	269	20	for	for	ADP
fuelectenerg-7534	269	21	a	a	DET
fuelectenerg-7534	269	22	k	k	PROPN
fuelectenerg-7534	269	23	band	band	NOUN
fuelectenerg-7534	269	24	phase	phase	NOUN
fuelectenerg-7534	269	25	shifter	shifter	NOUN
fuelectenerg-7534	269	26	by	by	ADP
fuelectenerg-7534	269	27	the	the	DET
fuelectenerg-7534	269	28	same	same	ADJ
fuelectenerg-7534	269	29	authors	author	NOUN
fuelectenerg-7534	269	30	.	.	PUNCT
fuelectenerg-7534	270	1	another	another	DET
fuelectenerg-7534	270	2	recent	recent	ADJ
fuelectenerg-7534	270	3	proposal	proposal	NOUN
fuelectenerg-7534	270	4	is	be	AUX
fuelectenerg-7534	270	5	provided	provide	VERB
fuelectenerg-7534	270	6	by	by	ADP
fuelectenerg-7534	270	7	[	[	X
fuelectenerg-7534	270	8	73	73	NUM
fuelectenerg-7534	270	9	]	]	PUNCT
fuelectenerg-7534	270	10	,	,	PUNCT
fuelectenerg-7534	270	11	with	with	ADP
fuelectenerg-7534	270	12	two	two	NUM
fuelectenerg-7534	270	13	realizations	realization	NOUN
fuelectenerg-7534	270	14	of	of	ADP
fuelectenerg-7534	270	15	4	4	NUM
fuelectenerg-7534	270	16	-	-	PUNCT
fuelectenerg-7534	270	17	bit	bit	NOUN
fuelectenerg-7534	270	18	phase	phase	NOUN
fuelectenerg-7534	270	19	shifters	shifter	NOUN
fuelectenerg-7534	270	20	for	for	ADP
fuelectenerg-7534	270	21	k	k	PROPN
fuelectenerg-7534	270	22	and	and	CCONJ
fuelectenerg-7534	270	23	ka	ka	PROPN
fuelectenerg-7534	270	24	frequency	frequency	PROPN
fuelectenerg-7534	270	25	bands	band	NOUN
fuelectenerg-7534	270	26	,	,	PUNCT
fuelectenerg-7534	270	27	in	in	ADP
fuelectenerg-7534	270	28	both	both	DET
fuelectenerg-7534	270	29	cases	case	NOUN
fuelectenerg-7534	270	30	composed	compose	VERB
fuelectenerg-7534	270	31	by	by	ADP
fuelectenerg-7534	270	32	4	4	NUM
fuelectenerg-7534	270	33	sections	section	NOUN
fuelectenerg-7534	270	34	comprising	comprise	VERB
fuelectenerg-7534	270	35	a	a	DET
fuelectenerg-7534	270	36	reference	reference	NOUN
fuelectenerg-7534	270	37	and	and	CCONJ
fuelectenerg-7534	270	38	a	a	DET
fuelectenerg-7534	270	39	shifting	shift	VERB
fuelectenerg-7534	270	40	path	path	NOUN
fuelectenerg-7534	270	41	.	.	PUNCT
fuelectenerg-7534	271	1	a	a	DET
fuelectenerg-7534	271	2	couple	couple	NOUN
fuelectenerg-7534	271	3	of	of	ADP
fuelectenerg-7534	271	4	monolithically	monolithically	ADV
fuelectenerg-7534	271	5	integrated	integrate	VERB
fuelectenerg-7534	271	6	mems	mem	NOUN
fuelectenerg-7534	271	7	spst	spst	PROPN
fuelectenerg-7534	271	8	switches	switch	NOUN
fuelectenerg-7534	271	9	control	control	VERB
fuelectenerg-7534	271	10	the	the	DET
fuelectenerg-7534	271	11	activation	activation	NOUN
fuelectenerg-7534	271	12	of	of	ADP
fuelectenerg-7534	271	13	each	each	DET
fuelectenerg-7534	271	14	path	path	NOUN
fuelectenerg-7534	271	15	by	by	ADP
fuelectenerg-7534	271	16	45	45	NUM
fuelectenerg-7534	271	17	v	v	NOUN
fuelectenerg-7534	271	18	signal	signal	NOUN
fuelectenerg-7534	271	19	,	,	PUNCT
fuelectenerg-7534	271	20	allowing	allow	VERB
fuelectenerg-7534	271	21	16	16	NUM
fuelectenerg-7534	271	22	phase	phase	NOUN
fuelectenerg-7534	271	23	states	state	NOUN
fuelectenerg-7534	271	24	.	.	PUNCT
fuelectenerg-7534	272	1	fabricated	fabricate	VERB
fuelectenerg-7534	272	2	variants	variant	NOUN
fuelectenerg-7534	272	3	for	for	ADP
fuelectenerg-7534	272	4	k	k	PROPN
fuelectenerg-7534	272	5	band	band	NOUN
fuelectenerg-7534	272	6	show	show	VERB
fuelectenerg-7534	272	7	a	a	DET
fuelectenerg-7534	272	8	footprint	footprint	NOUN
fuelectenerg-7534	272	9	of	of	ADP
fuelectenerg-7534	272	10	10.5x7.5	10.5x7.5	NUM
fuelectenerg-7534	272	11	mm2	mm2	NOUN
fuelectenerg-7534	272	12	.	.	PUNCT
fuelectenerg-7534	273	1	fig	fig	NOUN
fuelectenerg-7534	273	2	.	.	PUNCT
fuelectenerg-7534	274	1	5	5	NUM
fuelectenerg-7534	274	2	(	(	PUNCT
fuelectenerg-7534	274	3	a	a	PRON
fuelectenerg-7534	274	4	)	)	PUNCT
fuelectenerg-7534	274	5	switched	switch	VERB
fuelectenerg-7534	274	6	-	-	PUNCT
fuelectenerg-7534	274	7	line	line	NOUN
fuelectenerg-7534	274	8	phase	phase	NOUN
fuelectenerg-7534	274	9	shifter	shifter	NOUN
fuelectenerg-7534	274	10	described	describe	VERB
fuelectenerg-7534	274	11	in	in	ADP
fuelectenerg-7534	274	12	[	[	X
fuelectenerg-7534	274	13	66	66	NUM
fuelectenerg-7534	274	14	]	]	PUNCT
fuelectenerg-7534	274	15	,	,	PUNCT
fuelectenerg-7534	274	16	(	(	PUNCT
fuelectenerg-7534	274	17	b	b	NOUN
fuelectenerg-7534	274	18	)	)	PUNCT
fuelectenerg-7534	274	19	block	block	NOUN
fuelectenerg-7534	274	20	scheme	scheme	NOUN
fuelectenerg-7534	274	21	of	of	ADP
fuelectenerg-7534	274	22	the	the	DET
fuelectenerg-7534	274	23	device	device	NOUN
fuelectenerg-7534	274	24	reported	report	VERB
fuelectenerg-7534	274	25	in	in	ADP
fuelectenerg-7534	274	26	[	[	X
fuelectenerg-7534	274	27	69	69	NUM
fuelectenerg-7534	274	28	]	]	PUNCT
fuelectenerg-7534	274	29	,	,	PUNCT
fuelectenerg-7534	274	30	(	(	PUNCT
fuelectenerg-7534	274	31	c	c	X
fuelectenerg-7534	274	32	)	)	PUNCT
fuelectenerg-7534	274	33	top	top	ADJ
fuelectenerg-7534	274	34	view	view	NOUN
fuelectenerg-7534	274	35	of	of	ADP
fuelectenerg-7534	274	36	architecture	architecture	NOUN
fuelectenerg-7534	274	37	proposed	propose	VERB
fuelectenerg-7534	274	38	in	in	ADP
fuelectenerg-7534	274	39	[	[	X
fuelectenerg-7534	274	40	70	70	NUM
fuelectenerg-7534	274	41	]	]	PUNCT
fuelectenerg-7534	274	42	.	.	PUNCT
fuelectenerg-7534	275	1	4.2	4.2	NUM
fuelectenerg-7534	275	2	.	.	PUNCT
fuelectenerg-7534	275	3	loaded	load	VERB
fuelectenerg-7534	275	4	-	-	PUNCT
fuelectenerg-7534	275	5	line	line	NOUN
fuelectenerg-7534	275	6	regarding	regard	VERB
fuelectenerg-7534	275	7	loaded	load	VERB
fuelectenerg-7534	275	8	-	-	PUNCT
fuelectenerg-7534	275	9	line	line	NOUN
fuelectenerg-7534	275	10	architecture	architecture	NOUN
fuelectenerg-7534	275	11	,	,	PUNCT
fuelectenerg-7534	275	12	noteworthy	noteworthy	ADJ
fuelectenerg-7534	275	13	results	result	NOUN
fuelectenerg-7534	275	14	are	be	AUX
fuelectenerg-7534	275	15	obtained	obtain	VERB
fuelectenerg-7534	275	16	in	in	ADP
fuelectenerg-7534	275	17	[	[	X
fuelectenerg-7534	275	18	74][75	74][75	PROPN
fuelectenerg-7534	275	19	]	]	PUNCT
fuelectenerg-7534	275	20	.	.	PUNCT
fuelectenerg-7534	276	1	the	the	DET
fuelectenerg-7534	276	2	first	first	ADJ
fuelectenerg-7534	276	3	one	one	NOUN
fuelectenerg-7534	276	4	describes	describe	VERB
fuelectenerg-7534	276	5	a	a	DET
fuelectenerg-7534	276	6	device	device	NOUN
fuelectenerg-7534	276	7	composed	compose	VERB
fuelectenerg-7534	276	8	by	by	ADP
fuelectenerg-7534	276	9	a	a	DET
fuelectenerg-7534	276	10	transmission	transmission	NOUN
fuelectenerg-7534	276	11	line	line	NOUN
fuelectenerg-7534	276	12	periodically	periodically	ADV
fuelectenerg-7534	276	13	loaded	load	VERB
fuelectenerg-7534	276	14	by	by	ADP
fuelectenerg-7534	276	15	a	a	DET
fuelectenerg-7534	276	16	total	total	ADJ
fuelectenerg-7534	276	17	number	number	NOUN
fuelectenerg-7534	276	18	of	of	ADP
fuelectenerg-7534	276	19	eight	eight	NUM
fuelectenerg-7534	276	20	4	4	NUM
fuelectenerg-7534	276	21	-	-	PUNCT
fuelectenerg-7534	276	22	bit	bit	NOUN
fuelectenerg-7534	276	23	tunable	tunable	ADJ
fuelectenerg-7534	276	24	capacitive	capacitive	ADJ
fuelectenerg-7534	276	25	loads	load	NOUN
fuelectenerg-7534	276	26	.	.	PUNCT
fuelectenerg-7534	277	1	the	the	DET
fuelectenerg-7534	277	2	control	control	NOUN
fuelectenerg-7534	277	3	of	of	ADP
fuelectenerg-7534	277	4	capacitors	capacitor	NOUN
fuelectenerg-7534	277	5	is	be	AUX
fuelectenerg-7534	277	6	achieved	achieve	VERB
fuelectenerg-7534	277	7	by	by	ADP
fuelectenerg-7534	277	8	(	(	PUNCT
fuelectenerg-7534	277	9	lateral	lateral	ADJ
fuelectenerg-7534	277	10	)	)	PUNCT
fuelectenerg-7534	277	11	electrostatic	electrostatic	ADJ
fuelectenerg-7534	277	12	and	and	CCONJ
fuelectenerg-7534	277	13	(	(	PUNCT
fuelectenerg-7534	277	14	vertical	vertical	ADJ
fuelectenerg-7534	277	15	)	)	PUNCT
fuelectenerg-7534	277	16	electrothermal	electrothermal	ADJ
fuelectenerg-7534	277	17	actuation	actuation	NOUN
fuelectenerg-7534	277	18	.	.	PUNCT
fuelectenerg-7534	278	1	the	the	DET
fuelectenerg-7534	278	2	overall	overall	ADJ
fuelectenerg-7534	278	3	16	16	NUM
fuelectenerg-7534	278	4	states	state	NOUN
fuelectenerg-7534	278	5	(	(	PUNCT
fuelectenerg-7534	278	6	a	a	NOUN
fuelectenerg-7534	278	7	)	)	PUNCT
fuelectenerg-7534	278	8	(	(	PUNCT
fuelectenerg-7534	278	9	b	b	X
fuelectenerg-7534	278	10	)	)	PUNCT
fuelectenerg-7534	278	11	(	(	PUNCT
fuelectenerg-7534	278	12	c	c	X
fuelectenerg-7534	278	13	)	)	PUNCT
fuelectenerg-7534	278	14	348	348	NUM
fuelectenerg-7534	278	15	g.	g.	NOUN
fuelectenerg-7534	278	16	tagliapietra	tagliapietra	PROPN
fuelectenerg-7534	278	17	,	,	PUNCT
fuelectenerg-7534	278	18	j.	j.	PROPN
fuelectenerg-7534	278	19	iannacci	iannacci	PROPN
fuelectenerg-7534	278	20	allow	allow	VERB
fuelectenerg-7534	278	21	to	to	PART
fuelectenerg-7534	278	22	tune	tune	VERB
fuelectenerg-7534	278	23	digital	digital	ADJ
fuelectenerg-7534	278	24	capacitors	capacitor	NOUN
fuelectenerg-7534	278	25	from	from	ADP
fuelectenerg-7534	278	26	15.5	15.5	NUM
fuelectenerg-7534	278	27	to	to	ADP
fuelectenerg-7534	278	28	111.6	111.6	NUM
fuelectenerg-7534	278	29	ff	ff	NOUN
fuelectenerg-7534	278	30	,	,	PUNCT
fuelectenerg-7534	278	31	changing	change	VERB
fuelectenerg-7534	278	32	phase	phase	NOUN
fuelectenerg-7534	278	33	velocity	velocity	NOUN
fuelectenerg-7534	278	34	of	of	ADP
fuelectenerg-7534	278	35	the	the	DET
fuelectenerg-7534	278	36	line	line	NOUN
fuelectenerg-7534	278	37	and	and	CCONJ
fuelectenerg-7534	278	38	determining	determine	VERB
fuelectenerg-7534	278	39	a	a	DET
fuelectenerg-7534	278	40	maximum	maximum	ADJ
fuelectenerg-7534	278	41	phase	phase	NOUN
fuelectenerg-7534	278	42	shift	shift	NOUN
fuelectenerg-7534	278	43	of	of	ADP
fuelectenerg-7534	278	44	337.5	337.5	NUM
fuelectenerg-7534	278	45	°	°	NOUN
fuelectenerg-7534	278	46	.	.	PUNCT
fuelectenerg-7534	279	1	while	while	SCONJ
fuelectenerg-7534	279	2	electrostatic	electrostatic	ADJ
fuelectenerg-7534	279	3	actuation	actuation	NOUN
fuelectenerg-7534	279	4	requires	require	VERB
fuelectenerg-7534	279	5	20	20	NUM
fuelectenerg-7534	279	6	v	v	NOUN
fuelectenerg-7534	279	7	,	,	PUNCT
fuelectenerg-7534	279	8	its	its	PRON
fuelectenerg-7534	279	9	electrothermal	electrothermal	ADJ
fuelectenerg-7534	279	10	requirement	requirement	NOUN
fuelectenerg-7534	279	11	is	be	AUX
fuelectenerg-7534	279	12	just	just	ADV
fuelectenerg-7534	279	13	4.8	4.8	NUM
fuelectenerg-7534	279	14	v.	v.	ADP
fuelectenerg-7534	279	15	the	the	DET
fuelectenerg-7534	279	16	proposed	propose	VERB
fuelectenerg-7534	279	17	phase	phase	NOUN
fuelectenerg-7534	279	18	shifter	shifter	NOUN
fuelectenerg-7534	279	19	has	have	AUX
fuelectenerg-7534	279	20	been	be	AUX
fuelectenerg-7534	279	21	designed	design	VERB
fuelectenerg-7534	279	22	to	to	PART
fuelectenerg-7534	279	23	be	be	AUX
fuelectenerg-7534	279	24	monolithically	monolithically	ADV
fuelectenerg-7534	279	25	integrated	integrate	VERB
fuelectenerg-7534	279	26	with	with	ADP
fuelectenerg-7534	279	27	conventional	conventional	ADJ
fuelectenerg-7534	279	28	cmos	cmos	NOUN
fuelectenerg-7534	279	29	,	,	PUNCT
fuelectenerg-7534	279	30	and	and	CCONJ
fuelectenerg-7534	279	31	involves	involve	VERB
fuelectenerg-7534	279	32	an	an	DET
fuelectenerg-7534	279	33	overall	overall	ADJ
fuelectenerg-7534	279	34	footprint	footprint	NOUN
fuelectenerg-7534	279	35	of	of	ADP
fuelectenerg-7534	279	36	4.32x0.5	4.32x0.5	NUM
fuelectenerg-7534	279	37	mm2	mm2	NOUN
fuelectenerg-7534	279	38	,	,	PUNCT
fuelectenerg-7534	279	39	although	although	SCONJ
fuelectenerg-7534	279	40	the	the	DET
fuelectenerg-7534	279	41	aspect	aspect	NOUN
fuelectenerg-7534	279	42	ratio	ratio	NOUN
fuelectenerg-7534	279	43	is	be	AUX
fuelectenerg-7534	279	44	still	still	ADV
fuelectenerg-7534	279	45	relatively	relatively	ADV
fuelectenerg-7534	279	46	high	high	ADJ
fuelectenerg-7534	279	47	.	.	PUNCT
fuelectenerg-7534	280	1	another	another	DET
fuelectenerg-7534	280	2	digital	digital	ADJ
fuelectenerg-7534	280	3	phase	phase	NOUN
fuelectenerg-7534	280	4	shifter	shifter	NOUN
fuelectenerg-7534	280	5	is	be	AUX
fuelectenerg-7534	280	6	offered	offer	VERB
fuelectenerg-7534	280	7	by	by	ADP
fuelectenerg-7534	280	8	[	[	X
fuelectenerg-7534	280	9	75	75	NUM
fuelectenerg-7534	280	10	]	]	PUNCT
fuelectenerg-7534	280	11	,	,	PUNCT
fuelectenerg-7534	280	12	i.e.	i.e.	X
fuelectenerg-7534	280	13	a	a	DET
fuelectenerg-7534	280	14	3	3	NUM
fuelectenerg-7534	280	15	-	-	PUNCT
fuelectenerg-7534	280	16	bit	bit	NOUN
fuelectenerg-7534	280	17	device	device	NOUN
fuelectenerg-7534	280	18	allowing	allow	VERB
fuelectenerg-7534	280	19	a	a	DET
fuelectenerg-7534	280	20	total	total	ADJ
fuelectenerg-7534	280	21	315	315	NUM
fuelectenerg-7534	280	22	°	°	NOUN
fuelectenerg-7534	280	23	of	of	ADP
fuelectenerg-7534	280	24	shift	shift	NOUN
fuelectenerg-7534	280	25	.	.	PUNCT
fuelectenerg-7534	281	1	in	in	ADP
fuelectenerg-7534	281	2	a	a	DET
fuelectenerg-7534	281	3	more	more	ADV
fuelectenerg-7534	281	4	classic	classic	ADJ
fuelectenerg-7534	281	5	design	design	NOUN
fuelectenerg-7534	281	6	,	,	PUNCT
fuelectenerg-7534	281	7	quarter	quarter	NOUN
fuelectenerg-7534	281	8	wavelength	wavelength	NOUN
fuelectenerg-7534	281	9	microstrip	microstrip	NOUN
fuelectenerg-7534	281	10	sections	section	NOUN
fuelectenerg-7534	281	11	are	be	AUX
fuelectenerg-7534	281	12	periodically	periodically	ADV
fuelectenerg-7534	281	13	loaded	load	VERB
fuelectenerg-7534	281	14	with	with	ADP
fuelectenerg-7534	281	15	different	different	ADJ
fuelectenerg-7534	281	16	susceptances	susceptance	NOUN
fuelectenerg-7534	281	17	,	,	PUNCT
fuelectenerg-7534	281	18	sequentially	sequentially	ADV
fuelectenerg-7534	281	19	composing	compose	VERB
fuelectenerg-7534	281	20	180	180	NUM
fuelectenerg-7534	281	21	°	°	NOUN
fuelectenerg-7534	281	22	,	,	PUNCT
fuelectenerg-7534	281	23	90	90	NUM
fuelectenerg-7534	281	24	°	°	NUM
fuelectenerg-7534	281	25	and	and	CCONJ
fuelectenerg-7534	281	26	45	45	NUM
fuelectenerg-7534	281	27	°	°	NOUN
fuelectenerg-7534	281	28	shifting	shift	VERB
fuelectenerg-7534	281	29	sections	section	NOUN
fuelectenerg-7534	281	30	,	,	PUNCT
fuelectenerg-7534	281	31	within	within	ADP
fuelectenerg-7534	281	32	an	an	DET
fuelectenerg-7534	281	33	area	area	NOUN
fuelectenerg-7534	281	34	of	of	ADP
fuelectenerg-7534	281	35	20.5x6.5	20.5x6.5	NUM
fuelectenerg-7534	281	36	mm2	mm2	NOUN
fuelectenerg-7534	281	37	.	.	PUNCT
fuelectenerg-7534	281	38	table	table	NOUN
fuelectenerg-7534	281	39	4	4	NUM
fuelectenerg-7534	281	40	comparison	comparison	NOUN
fuelectenerg-7534	281	41	between	between	ADP
fuelectenerg-7534	281	42	the	the	DET
fuelectenerg-7534	281	43	different	different	ADJ
fuelectenerg-7534	281	44	discussed	discuss	VERB
fuelectenerg-7534	281	45	realizations	realization	NOUN
fuelectenerg-7534	281	46	of	of	ADP
fuelectenerg-7534	281	47	phase	phase	NOUN
fuelectenerg-7534	281	48	shifters	shifter	NOUN
fuelectenerg-7534	281	49	,	,	PUNCT
fuelectenerg-7534	281	50	comprehending	comprehend	VERB
fuelectenerg-7534	281	51	switched	switch	VERB
fuelectenerg-7534	281	52	-	-	PUNCT
fuelectenerg-7534	281	53	line	line	NOUN
fuelectenerg-7534	281	54	and	and	CCONJ
fuelectenerg-7534	281	55	loaded	load	VERB
fuelectenerg-7534	281	56	-	-	PUNCT
fuelectenerg-7534	281	57	line	line	NOUN
fuelectenerg-7534	281	58	topologies	topology	NOUN
fuelectenerg-7534	281	59	.	.	PUNCT
fuelectenerg-7534	282	1	for	for	ADP
fuelectenerg-7534	282	2	each	each	DET
fuelectenerg-7534	282	3	realization	realization	NOUN
fuelectenerg-7534	282	4	,	,	PUNCT
fuelectenerg-7534	282	5	the	the	DET
fuelectenerg-7534	282	6	reported	report	VERB
fuelectenerg-7534	282	7	return	return	NOUN
fuelectenerg-7534	282	8	loss	loss	NOUN
fuelectenerg-7534	282	9	,	,	PUNCT
fuelectenerg-7534	282	10	insertion	insertion	NOUN
fuelectenerg-7534	282	11	loss	loss	NOUN
fuelectenerg-7534	282	12	,	,	PUNCT
fuelectenerg-7534	282	13	and	and	CCONJ
fuelectenerg-7534	282	14	phase	phase	NOUN
fuelectenerg-7534	282	15	error	error	NOUN
fuelectenerg-7534	282	16	referred	refer	VERB
fuelectenerg-7534	282	17	to	to	ADP
fuelectenerg-7534	282	18	worst	bad	ADJ
fuelectenerg-7534	282	19	case	case	NOUN
fuelectenerg-7534	282	20	among	among	ADP
fuelectenerg-7534	282	21	the	the	DET
fuelectenerg-7534	282	22	various	various	ADJ
fuelectenerg-7534	282	23	observed	observed	ADJ
fuelectenerg-7534	282	24	states	state	NOUN
fuelectenerg-7534	282	25	are	be	AUX
fuelectenerg-7534	282	26	reported	report	VERB
fuelectenerg-7534	282	27	.	.	PUNCT
fuelectenerg-7534	283	1	work	work	NOUN
fuelectenerg-7534	283	2	type	type	NOUN
fuelectenerg-7534	283	3	measured	measure	VERB
fuelectenerg-7534	283	4	@(ghz	@(ghz	PROPN
fuelectenerg-7534	283	5	)	)	PUNCT
fuelectenerg-7534	283	6	ret	ret	PROPN
fuelectenerg-7534	283	7	.	.	PUNCT
fuelectenerg-7534	283	8	loss	loss	PROPN
fuelectenerg-7534	283	9	(	(	PUNCT
fuelectenerg-7534	283	10	db	db	NOUN
fuelectenerg-7534	283	11	)	)	PUNCT
fuelectenerg-7534	283	12	ins	in	NOUN
fuelectenerg-7534	283	13	.	.	PUNCT
fuelectenerg-7534	284	1	loss	loss	NOUN
fuelectenerg-7534	284	2	(	(	PUNCT
fuelectenerg-7534	284	3	db	db	NOUN
fuelectenerg-7534	284	4	)	)	PUNCT
fuelectenerg-7534	284	5	min	min	NOUN
fuelectenerg-7534	284	6	shift	shift	NOUN
fuelectenerg-7534	284	7	(	(	PUNCT
fuelectenerg-7534	284	8	°	°	NOUN
fuelectenerg-7534	284	9	)	)	PUNCT
fuelectenerg-7534	284	10	max	max	PROPN
fuelectenerg-7534	284	11	shift	shift	NOUN
fuelectenerg-7534	284	12	(	(	PUNCT
fuelectenerg-7534	284	13	°	°	NOUN
fuelectenerg-7534	284	14	)	)	PUNCT
fuelectenerg-7534	284	15	error	error	NOUN
fuelectenerg-7534	284	16	(	(	PUNCT
fuelectenerg-7534	284	17	°	°	ADP
fuelectenerg-7534	284	18	)	)	PUNCT
fuelectenerg-7534	285	1	[	[	X
fuelectenerg-7534	285	2	66	66	NUM
fuelectenerg-7534	285	3	]	]	PUNCT
fuelectenerg-7534	285	4	sl	sl	VERB
fuelectenerg-7534	285	5	1	1	NUM
fuelectenerg-7534	285	6	15	15	NUM
fuelectenerg-7534	285	7	3.1	3.1	NUM
fuelectenerg-7534	285	8	5.625	5.625	NUM
fuelectenerg-7534	285	9	337.5	337.5	NUM
fuelectenerg-7534	286	1	[	[	X
fuelectenerg-7534	286	2	67	67	NUM
fuelectenerg-7534	286	3	]	]	PUNCT
fuelectenerg-7534	286	4	sl	sl	VERB
fuelectenerg-7534	286	5	30	30	NUM
fuelectenerg-7534	286	6	1.5	1.5	NUM
fuelectenerg-7534	286	7	0	0	NUM
fuelectenerg-7534	286	8	187	187	NUM
fuelectenerg-7534	286	9	7	7	NUM
fuelectenerg-7534	287	1	[	[	X
fuelectenerg-7534	287	2	68	68	NUM
fuelectenerg-7534	287	3	]	]	SYM
fuelectenerg-7534	287	4	sl	sl	PROPN
fuelectenerg-7534	287	5	24	24	NUM
fuelectenerg-7534	287	6	19.2	19.2	NUM
fuelectenerg-7534	287	7	1.65	1.65	NUM
fuelectenerg-7534	287	8	0	0	NUM
fuelectenerg-7534	287	9	184.6	184.6	NUM
fuelectenerg-7534	287	10	4.6	4.6	NUM
fuelectenerg-7534	288	1	[	[	X
fuelectenerg-7534	288	2	69	69	NUM
fuelectenerg-7534	288	3	]	]	PUNCT
fuelectenerg-7534	288	4	sl	sl	VERB
fuelectenerg-7534	288	5	2.7	2.7	NUM
fuelectenerg-7534	288	6	13.4	13.4	NUM
fuelectenerg-7534	288	7	0.89	0.89	NUM
fuelectenerg-7534	288	8	5	5	NUM
fuelectenerg-7534	288	9	75	75	NUM
fuelectenerg-7534	288	10	2.05	2.05	NUM
fuelectenerg-7534	289	1	[	[	X
fuelectenerg-7534	289	2	70	70	NUM
fuelectenerg-7534	289	3	]	]	PUNCT
fuelectenerg-7534	289	4	sl	sl	VERB
fuelectenerg-7534	289	5	17	17	NUM
fuelectenerg-7534	289	6	22	22	NUM
fuelectenerg-7534	289	7	3.72	3.72	NUM
fuelectenerg-7534	289	8	11.25	11.25	NUM
fuelectenerg-7534	289	9	348.75	348.75	NUM
fuelectenerg-7534	289	10	1.14	1.14	NUM
fuelectenerg-7534	290	1	[	[	X
fuelectenerg-7534	290	2	71	71	NUM
fuelectenerg-7534	290	3	]	]	SYM
fuelectenerg-7534	290	4	sl	sl	VERB
fuelectenerg-7534	290	5	35	35	NUM
fuelectenerg-7534	290	6	14	14	NUM
fuelectenerg-7534	290	7	5.07	5.07	NUM
fuelectenerg-7534	290	8	45	45	NUM
fuelectenerg-7534	290	9	315	315	NUM
fuelectenerg-7534	290	10	1.78	1.78	NUM
fuelectenerg-7534	291	1	[	[	X
fuelectenerg-7534	291	2	73	73	NUM
fuelectenerg-7534	291	3	]	]	PUNCT
fuelectenerg-7534	291	4	sl	sl	VERB
fuelectenerg-7534	291	5	19.5	19.5	NUM
fuelectenerg-7534	291	6	15	15	NUM
fuelectenerg-7534	291	7	6.8	6.8	NUM
fuelectenerg-7534	291	8	22.5	22.5	NUM
fuelectenerg-7534	291	9	180	180	NUM
fuelectenerg-7534	291	10	4.5	4.5	NUM
fuelectenerg-7534	292	1	[	[	X
fuelectenerg-7534	292	2	74	74	NUM
fuelectenerg-7534	292	3	]	]	SYM
fuelectenerg-7534	292	4	ll	ll	AUX
fuelectenerg-7534	292	5	32	32	NUM
fuelectenerg-7534	292	6	15	15	NUM
fuelectenerg-7534	292	7	3.9	3.9	NUM
fuelectenerg-7534	292	8	45	45	NUM
fuelectenerg-7534	292	9	337.5	337.5	NUM
fuelectenerg-7534	292	10	[	[	X
fuelectenerg-7534	292	11	75	75	NUM
fuelectenerg-7534	292	12	]	]	PUNCT
fuelectenerg-7534	292	13	ll	ll	AUX
fuelectenerg-7534	292	14	2.5	2.5	NUM
fuelectenerg-7534	292	15	8.5	8.5	NUM
fuelectenerg-7534	292	16	4	4	NUM
fuelectenerg-7534	292	17	45	45	NUM
fuelectenerg-7534	292	18	315	315	NUM
fuelectenerg-7534	292	19	7.9	7.9	NUM
fuelectenerg-7534	292	20	4.3	4.3	NUM
fuelectenerg-7534	292	21	.	.	PUNCT
fuelectenerg-7534	293	1	distributed	distribute	VERB
fuelectenerg-7534	293	2	mems	mem	NOUN
fuelectenerg-7534	293	3	transmission	transmission	NOUN
fuelectenerg-7534	293	4	line	line	NOUN
fuelectenerg-7534	293	5	concerning	concern	VERB
fuelectenerg-7534	293	6	dmtl	dmtl	NOUN
fuelectenerg-7534	293	7	topology	topology	NOUN
fuelectenerg-7534	293	8	,	,	PUNCT
fuelectenerg-7534	293	9	multiple	multiple	ADJ
fuelectenerg-7534	293	10	suggestions	suggestion	NOUN
fuelectenerg-7534	293	11	have	have	AUX
fuelectenerg-7534	293	12	been	be	AUX
fuelectenerg-7534	293	13	provided	provide	VERB
fuelectenerg-7534	293	14	even	even	ADV
fuelectenerg-7534	293	15	only	only	ADV
fuelectenerg-7534	293	16	in	in	ADP
fuelectenerg-7534	293	17	the	the	DET
fuelectenerg-7534	293	18	last	last	ADJ
fuelectenerg-7534	293	19	half	half	ADJ
fuelectenerg-7534	293	20	decade	decade	NOUN
fuelectenerg-7534	293	21	.	.	PUNCT
fuelectenerg-7534	294	1	different	different	ADJ
fuelectenerg-7534	294	2	examples	example	NOUN
fuelectenerg-7534	294	3	are	be	AUX
fuelectenerg-7534	294	4	reported	report	VERB
fuelectenerg-7534	294	5	,	,	PUNCT
fuelectenerg-7534	294	6	covering	cover	VERB
fuelectenerg-7534	294	7	a	a	DET
fuelectenerg-7534	294	8	certain	certain	ADJ
fuelectenerg-7534	294	9	variety	variety	NOUN
fuelectenerg-7534	294	10	of	of	ADP
fuelectenerg-7534	294	11	possible	possible	ADJ
fuelectenerg-7534	294	12	arrangements	arrangement	NOUN
fuelectenerg-7534	294	13	and	and	CCONJ
fuelectenerg-7534	294	14	improvements	improvement	NOUN
fuelectenerg-7534	294	15	.	.	PUNCT
fuelectenerg-7534	295	1	the	the	DET
fuelectenerg-7534	295	2	most	most	ADV
fuelectenerg-7534	295	3	classic	classic	ADJ
fuelectenerg-7534	295	4	examples	example	NOUN
fuelectenerg-7534	295	5	of	of	ADP
fuelectenerg-7534	295	6	dmtl	dmtl	NOUN
fuelectenerg-7534	295	7	design	design	NOUN
fuelectenerg-7534	295	8	are	be	AUX
fuelectenerg-7534	295	9	reported	report	VERB
fuelectenerg-7534	295	10	in	in	ADP
fuelectenerg-7534	295	11	[	[	X
fuelectenerg-7534	295	12	76][77][78	76][77][78	NOUN
fuelectenerg-7534	295	13	]	]	PUNCT
fuelectenerg-7534	295	14	.	.	PUNCT
fuelectenerg-7534	296	1	being	be	AUX
fuelectenerg-7534	296	2	a	a	DET
fuelectenerg-7534	296	3	dmtl	dmtl	NOUN
fuelectenerg-7534	296	4	phase	phase	NOUN
fuelectenerg-7534	296	5	shifter	shifter	NOUN
fuelectenerg-7534	296	6	basically	basically	ADV
fuelectenerg-7534	296	7	composed	compose	VERB
fuelectenerg-7534	296	8	by	by	ADP
fuelectenerg-7534	296	9	a	a	DET
fuelectenerg-7534	296	10	transmission	transmission	NOUN
fuelectenerg-7534	296	11	line	line	NOUN
fuelectenerg-7534	296	12	loaded	load	VERB
fuelectenerg-7534	296	13	with	with	ADP
fuelectenerg-7534	296	14	mems	mems	ADJ
fuelectenerg-7534	296	15	bridges	bridge	NOUN
fuelectenerg-7534	296	16	,	,	PUNCT
fuelectenerg-7534	296	17	the	the	DET
fuelectenerg-7534	296	18	work	work	NOUN
fuelectenerg-7534	296	19	in	in	ADP
fuelectenerg-7534	296	20	[	[	X
fuelectenerg-7534	296	21	77	77	NUM
fuelectenerg-7534	296	22	]	]	PUNCT
fuelectenerg-7534	296	23	is	be	AUX
fuelectenerg-7534	296	24	the	the	DET
fuelectenerg-7534	296	25	study	study	NOUN
fuelectenerg-7534	296	26	of	of	ADP
fuelectenerg-7534	296	27	a	a	DET
fuelectenerg-7534	296	28	simple	simple	ADJ
fuelectenerg-7534	296	29	one	one	NUM
fuelectenerg-7534	296	30	-	-	PUNCT
fuelectenerg-7534	296	31	bit	bit	NOUN
fuelectenerg-7534	296	32	dmtl	dmtl	PROPN
fuelectenerg-7534	296	33	cell	cell	NOUN
fuelectenerg-7534	296	34	aimed	aim	VERB
fuelectenerg-7534	296	35	at	at	ADP
fuelectenerg-7534	296	36	the	the	DET
fuelectenerg-7534	296	37	improvement	improvement	NOUN
fuelectenerg-7534	296	38	of	of	ADP
fuelectenerg-7534	296	39	a	a	DET
fuelectenerg-7534	296	40	basic	basic	ADJ
fuelectenerg-7534	296	41	switched	switch	VERB
fuelectenerg-7534	296	42	-	-	PUNCT
fuelectenerg-7534	296	43	line	line	NOUN
fuelectenerg-7534	296	44	1	1	NUM
fuelectenerg-7534	296	45	-	-	PUNCT
fuelectenerg-7534	296	46	bit	bit	NOUN
fuelectenerg-7534	296	47	phase	phase	NOUN
fuelectenerg-7534	296	48	shifter	shifter	NOUN
fuelectenerg-7534	296	49	in	in	ADP
fuelectenerg-7534	296	50	the	the	DET
fuelectenerg-7534	296	51	range	range	NOUN
fuelectenerg-7534	296	52	1	1	NUM
fuelectenerg-7534	296	53	-	-	SYM
fuelectenerg-7534	296	54	6	6	NUM
fuelectenerg-7534	296	55	ghz	ghz	NOUN
fuelectenerg-7534	296	56	.	.	PUNCT
fuelectenerg-7534	297	1	such	such	ADJ
fuelectenerg-7534	297	2	study	study	NOUN
fuelectenerg-7534	297	3	reports	report	VERB
fuelectenerg-7534	297	4	that	that	SCONJ
fuelectenerg-7534	297	5	adding	add	VERB
fuelectenerg-7534	297	6	a	a	DET
fuelectenerg-7534	297	7	mems	mem	NOUN
fuelectenerg-7534	297	8	bridge	bridge	NOUN
fuelectenerg-7534	297	9	on	on	ADP
fuelectenerg-7534	297	10	the	the	DET
fuelectenerg-7534	297	11	shifting	shift	VERB
fuelectenerg-7534	297	12	signal	signal	NOUN
fuelectenerg-7534	297	13	path	path	NOUN
fuelectenerg-7534	297	14	introduces	introduce	VERB
fuelectenerg-7534	297	15	an	an	DET
fuelectenerg-7534	297	16	improvement	improvement	NOUN
fuelectenerg-7534	297	17	of	of	ADP
fuelectenerg-7534	297	18	40	40	NUM
fuelectenerg-7534	297	19	%	%	NOUN
fuelectenerg-7534	297	20	and	and	CCONJ
fuelectenerg-7534	297	21	25	25	NUM
fuelectenerg-7534	297	22	%	%	NOUN
fuelectenerg-7534	297	23	as	as	ADP
fuelectenerg-7534	297	24	compared	compare	VERB
fuelectenerg-7534	297	25	to	to	ADP
fuelectenerg-7534	297	26	initial	initial	ADJ
fuelectenerg-7534	297	27	size	size	NOUN
fuelectenerg-7534	297	28	and	and	CCONJ
fuelectenerg-7534	297	29	losses	loss	NOUN
fuelectenerg-7534	297	30	,	,	PUNCT
fuelectenerg-7534	297	31	respectively	respectively	ADV
fuelectenerg-7534	297	32	.	.	PUNCT
fuelectenerg-7534	298	1	despite	despite	SCONJ
fuelectenerg-7534	298	2	the	the	DET
fuelectenerg-7534	298	3	traditional	traditional	ADJ
fuelectenerg-7534	298	4	design	design	NOUN
fuelectenerg-7534	298	5	,	,	PUNCT
fuelectenerg-7534	298	6	an	an	DET
fuelectenerg-7534	298	7	innovative	innovative	ADJ
fuelectenerg-7534	298	8	proposal	proposal	NOUN
fuelectenerg-7534	298	9	is	be	AUX
fuelectenerg-7534	298	10	discussed	discuss	VERB
fuelectenerg-7534	298	11	in	in	ADP
fuelectenerg-7534	298	12	[	[	X
fuelectenerg-7534	298	13	76	76	NUM
fuelectenerg-7534	298	14	]	]	PUNCT
fuelectenerg-7534	298	15	.	.	PUNCT
fuelectenerg-7534	299	1	in	in	ADP
fuelectenerg-7534	299	2	this	this	DET
fuelectenerg-7534	299	3	work	work	NOUN
fuelectenerg-7534	299	4	,	,	PUNCT
fuelectenerg-7534	299	5	the	the	DET
fuelectenerg-7534	299	6	signal	signal	ADJ
fuelectenerg-7534	299	7	line	line	NOUN
fuelectenerg-7534	299	8	is	be	AUX
fuelectenerg-7534	299	9	loaded	load	VERB
fuelectenerg-7534	299	10	with	with	ADP
fuelectenerg-7534	299	11	26	26	NUM
fuelectenerg-7534	299	12	capacitive	capacitive	ADJ
fuelectenerg-7534	299	13	bridges	bridge	NOUN
fuelectenerg-7534	299	14	,	,	PUNCT
fuelectenerg-7534	299	15	with	with	ADP
fuelectenerg-7534	299	16	7	7	NUM
fuelectenerg-7534	299	17	possible	possible	ADJ
fuelectenerg-7534	299	18	lengths	length	NOUN
fuelectenerg-7534	299	19	.	.	PUNCT
fuelectenerg-7534	300	1	since	since	SCONJ
fuelectenerg-7534	300	2	its	its	PRON
fuelectenerg-7534	300	3	longer	long	ADJ
fuelectenerg-7534	300	4	bridges	bridge	NOUN
fuelectenerg-7534	300	5	need	need	VERB
fuelectenerg-7534	300	6	lower	low	ADJ
fuelectenerg-7534	300	7	actuation	actuation	NOUN
fuelectenerg-7534	300	8	voltage	voltage	NOUN
fuelectenerg-7534	300	9	(	(	PUNCT
fuelectenerg-7534	300	10	10	10	NUM
fuelectenerg-7534	300	11	v	v	NOUN
fuelectenerg-7534	300	12	)	)	PUNCT
fuelectenerg-7534	300	13	as	as	SCONJ
fuelectenerg-7534	300	14	compared	compare	VERB
fuelectenerg-7534	300	15	to	to	ADP
fuelectenerg-7534	300	16	shorter	short	ADJ
fuelectenerg-7534	300	17	bridges	bridge	NOUN
fuelectenerg-7534	300	18	(	(	PUNCT
fuelectenerg-7534	300	19	40	40	NUM
fuelectenerg-7534	300	20	v	v	NOUN
fuelectenerg-7534	300	21	)	)	PUNCT
fuelectenerg-7534	300	22	,	,	PUNCT
fuelectenerg-7534	300	23	each	each	PRON
fuelectenerg-7534	300	24	buried	bury	VERB
fuelectenerg-7534	300	25	electrode	electrode	NOUN
fuelectenerg-7534	300	26	controlling	control	VERB
fuelectenerg-7534	300	27	a	a	DET
fuelectenerg-7534	300	28	bridge	bridge	NOUN
fuelectenerg-7534	300	29	is	be	AUX
fuelectenerg-7534	300	30	connected	connect	VERB
fuelectenerg-7534	300	31	to	to	ADP
fuelectenerg-7534	300	32	the	the	DET
fuelectenerg-7534	300	33	same	same	ADJ
fuelectenerg-7534	300	34	dc	dc	PROPN
fuelectenerg-7534	300	35	voltage	voltage	NOUN
fuelectenerg-7534	300	36	pad	pad	NOUN
fuelectenerg-7534	300	37	.	.	PUNCT
fuelectenerg-7534	301	1	in	in	ADP
fuelectenerg-7534	301	2	this	this	DET
fuelectenerg-7534	301	3	manner	manner	NOUN
fuelectenerg-7534	301	4	,	,	PUNCT
fuelectenerg-7534	301	5	a	a	DET
fuelectenerg-7534	301	6	single	single	ADJ
fuelectenerg-7534	301	7	signal	signal	NOUN
fuelectenerg-7534	301	8	will	will	AUX
fuelectenerg-7534	301	9	actuate	actuate	VERB
fuelectenerg-7534	301	10	all	all	DET
fuelectenerg-7534	301	11	bridges	bridge	NOUN
fuelectenerg-7534	301	12	characterized	characterize	VERB
fuelectenerg-7534	301	13	by	by	ADP
fuelectenerg-7534	301	14	the	the	DET
fuelectenerg-7534	301	15	same	same	ADJ
fuelectenerg-7534	301	16	length	length	NOUN
fuelectenerg-7534	301	17	,	,	PUNCT
fuelectenerg-7534	301	18	determining	determine	VERB
fuelectenerg-7534	301	19	a	a	DET
fuelectenerg-7534	301	20	precise	precise	ADJ
fuelectenerg-7534	301	21	phase	phase	NOUN
fuelectenerg-7534	301	22	shift	shift	NOUN
fuelectenerg-7534	301	23	.	.	PUNCT
fuelectenerg-7534	302	1	such	such	ADJ
fuelectenerg-7534	302	2	design	design	NOUN
fuelectenerg-7534	302	3	avoids	avoid	VERB
fuelectenerg-7534	302	4	the	the	DET
fuelectenerg-7534	302	5	presence	presence	NOUN
fuelectenerg-7534	302	6	of	of	ADP
fuelectenerg-7534	302	7	multiple	multiple	ADJ
fuelectenerg-7534	302	8	control	control	NOUN
fuelectenerg-7534	302	9	pads	pad	NOUN
fuelectenerg-7534	302	10	,	,	PUNCT
fuelectenerg-7534	302	11	reducing	reduce	VERB
fuelectenerg-7534	302	12	the	the	DET
fuelectenerg-7534	302	13	footprint	footprint	NOUN
fuelectenerg-7534	302	14	of	of	ADP
fuelectenerg-7534	302	15	this	this	DET
fuelectenerg-7534	302	16	7	7	NUM
fuelectenerg-7534	302	17	-	-	PUNCT
fuelectenerg-7534	302	18	states	state	NOUN
fuelectenerg-7534	302	19	device	device	NOUN
fuelectenerg-7534	302	20	to	to	ADP
fuelectenerg-7534	302	21	7x0.8	7x0.8	NUM
fuelectenerg-7534	302	22	mm2	mm2	NOUN
fuelectenerg-7534	302	23	.	.	PUNCT
fuelectenerg-7534	303	1	a	a	DET
fuelectenerg-7534	303	2	comprehensive	comprehensive	ADJ
fuelectenerg-7534	303	3	overview	overview	NOUN
fuelectenerg-7534	303	4	of	of	ADP
fuelectenerg-7534	303	5	recent	recent	ADJ
fuelectenerg-7534	303	6	developments	development	NOUN
fuelectenerg-7534	303	7	in	in	ADP
fuelectenerg-7534	303	8	rf	rf	ADJ
fuelectenerg-7534	303	9	-	-	PUNCT
fuelectenerg-7534	303	10	mems	mems	ADJ
fuelectenerg-7534	303	11	technology	technology	NOUN
fuelectenerg-7534	303	12	349	349	NUM
fuelectenerg-7534	303	13	fig	fig	NOUN
fuelectenerg-7534	303	14	.	.	PUNCT
fuelectenerg-7534	304	1	6	6	NUM
fuelectenerg-7534	304	2	(	(	PUNCT
fuelectenerg-7534	304	3	a	a	X
fuelectenerg-7534	304	4	)	)	PUNCT
fuelectenerg-7534	304	5	schematic	schematic	ADJ
fuelectenerg-7534	304	6	section	section	NOUN
fuelectenerg-7534	304	7	of	of	ADP
fuelectenerg-7534	304	8	dmtl	dmtl	NOUN
fuelectenerg-7534	304	9	phase	phase	NOUN
fuelectenerg-7534	304	10	shifter	shifter	NOUN
fuelectenerg-7534	304	11	described	describe	VERB
fuelectenerg-7534	304	12	in	in	ADP
fuelectenerg-7534	304	13	[	[	X
fuelectenerg-7534	304	14	83	83	NUM
fuelectenerg-7534	304	15	]	]	PUNCT
fuelectenerg-7534	304	16	,	,	PUNCT
fuelectenerg-7534	304	17	(	(	PUNCT
fuelectenerg-7534	304	18	b	b	X
fuelectenerg-7534	304	19	)	)	PUNCT
fuelectenerg-7534	304	20	top	top	ADJ
fuelectenerg-7534	304	21	view	view	NOUN
fuelectenerg-7534	304	22	of	of	ADP
fuelectenerg-7534	304	23	4bit	4bit	NOUN
fuelectenerg-7534	304	24	device	device	NOUN
fuelectenerg-7534	304	25	offered	offer	VERB
fuelectenerg-7534	304	26	by	by	ADP
fuelectenerg-7534	304	27	[	[	PUNCT
fuelectenerg-7534	304	28	84	84	NUM
fuelectenerg-7534	304	29	]	]	PUNCT
fuelectenerg-7534	304	30	,	,	PUNCT
fuelectenerg-7534	304	31	(	(	PUNCT
fuelectenerg-7534	304	32	c	c	X
fuelectenerg-7534	304	33	)	)	PUNCT
fuelectenerg-7534	304	34	schematic	schematic	ADJ
fuelectenerg-7534	304	35	of	of	ADP
fuelectenerg-7534	304	36	the	the	DET
fuelectenerg-7534	304	37	arrangement	arrangement	NOUN
fuelectenerg-7534	304	38	proposed	propose	VERB
fuelectenerg-7534	304	39	in	in	ADP
fuelectenerg-7534	304	40	[	[	X
fuelectenerg-7534	304	41	85	85	NUM
fuelectenerg-7534	304	42	]	]	PUNCT
fuelectenerg-7534	304	43	.	.	PUNCT
fuelectenerg-7534	305	1	following	follow	VERB
fuelectenerg-7534	305	2	the	the	DET
fuelectenerg-7534	305	3	traditional	traditional	ADJ
fuelectenerg-7534	305	4	“	"	PUNCT
fuelectenerg-7534	305	5	straight	straight	ADV
fuelectenerg-7534	305	6	loaded	load	VERB
fuelectenerg-7534	305	7	line	line	NOUN
fuelectenerg-7534	305	8	"	"	PUNCT
fuelectenerg-7534	305	9	approach	approach	NOUN
fuelectenerg-7534	305	10	,	,	PUNCT
fuelectenerg-7534	305	11	[	[	X
fuelectenerg-7534	305	12	78	78	NUM
fuelectenerg-7534	305	13	]	]	PUNCT
fuelectenerg-7534	305	14	emphasizes	emphasize	VERB
fuelectenerg-7534	305	15	the	the	DET
fuelectenerg-7534	305	16	importance	importance	NOUN
fuelectenerg-7534	305	17	of	of	ADP
fuelectenerg-7534	305	18	miniaturization	miniaturization	NOUN
fuelectenerg-7534	305	19	for	for	ADP
fuelectenerg-7534	305	20	movable	movable	ADJ
fuelectenerg-7534	305	21	components	component	NOUN
fuelectenerg-7534	305	22	.	.	PUNCT
fuelectenerg-7534	306	1	in	in	ADP
fuelectenerg-7534	306	2	particular	particular	ADJ
fuelectenerg-7534	306	3	,	,	PUNCT
fuelectenerg-7534	306	4	the	the	DET
fuelectenerg-7534	306	5	fabrication	fabrication	NOUN
fuelectenerg-7534	306	6	of	of	ADP
fuelectenerg-7534	306	7	bridges	bridge	NOUN
fuelectenerg-7534	306	8	with	with	ADP
fuelectenerg-7534	306	9	a	a	DET
fuelectenerg-7534	306	10	scaled	scale	VERB
fuelectenerg-7534	306	11	area	area	NOUN
fuelectenerg-7534	306	12	allowed	allow	VERB
fuelectenerg-7534	306	13	the	the	DET
fuelectenerg-7534	306	14	authors	author	NOUN
fuelectenerg-7534	306	15	to	to	PART
fuelectenerg-7534	306	16	design	design	VERB
fuelectenerg-7534	306	17	a	a	DET
fuelectenerg-7534	306	18	basic	basic	ADJ
fuelectenerg-7534	306	19	30	30	NUM
fuelectenerg-7534	306	20	°	°	PROPN
fuelectenerg-7534	306	21	delay	delay	NOUN
fuelectenerg-7534	306	22	cell	cell	NOUN
fuelectenerg-7534	306	23	with	with	ADP
fuelectenerg-7534	306	24	1x0.66	1x0.66	NUM
fuelectenerg-7534	306	25	mm2	mm2	NOUN
fuelectenerg-7534	306	26	area	area	NOUN
fuelectenerg-7534	306	27	,	,	PUNCT
fuelectenerg-7534	306	28	reduced	reduce	VERB
fuelectenerg-7534	306	29	actuation	actuation	NOUN
fuelectenerg-7534	306	30	voltage	voltage	NOUN
fuelectenerg-7534	306	31	(	(	PUNCT
fuelectenerg-7534	306	32	14.6	14.6	NUM
fuelectenerg-7534	306	33	v	v	NOUN
fuelectenerg-7534	306	34	)	)	PUNCT
fuelectenerg-7534	306	35	,	,	PUNCT
fuelectenerg-7534	306	36	and	and	CCONJ
fuelectenerg-7534	306	37	low	low	ADJ
fuelectenerg-7534	306	38	switching	switching	NOUN
fuelectenerg-7534	306	39	time	time	NOUN
fuelectenerg-7534	306	40	(	(	PUNCT
fuelectenerg-7534	306	41	0.6	0.6	NUM
fuelectenerg-7534	306	42	μs	μs	NUM
fuelectenerg-7534	306	43	)	)	PUNCT
fuelectenerg-7534	306	44	.	.	PUNCT
fuelectenerg-7534	307	1	promising	promise	VERB
fuelectenerg-7534	307	2	performances	performance	NOUN
fuelectenerg-7534	307	3	of	of	ADP
fuelectenerg-7534	307	4	the	the	DET
fuelectenerg-7534	307	5	cell	cell	NOUN
fuelectenerg-7534	307	6	thus	thus	ADV
fuelectenerg-7534	307	7	permitted	permit	VERB
fuelectenerg-7534	307	8	to	to	PART
fuelectenerg-7534	307	9	cascade	cascade	VERB
fuelectenerg-7534	307	10	six	six	NUM
fuelectenerg-7534	307	11	of	of	ADP
fuelectenerg-7534	307	12	them	they	PRON
fuelectenerg-7534	307	13	,	,	PUNCT
fuelectenerg-7534	307	14	obtaining	obtain	VERB
fuelectenerg-7534	307	15	a	a	DET
fuelectenerg-7534	307	16	180	180	NUM
fuelectenerg-7534	307	17	°	°	NOUN
fuelectenerg-7534	307	18	phase	phase	NOUN
fuelectenerg-7534	307	19	shifter	shifter	NOUN
fuelectenerg-7534	307	20	with	with	ADP
fuelectenerg-7534	307	21	4x1	4x1	NUM
fuelectenerg-7534	307	22	mm2	mm2	NOUN
fuelectenerg-7534	307	23	on	on	ADP
fuelectenerg-7534	307	24	quartz	quartz	NOUN
fuelectenerg-7534	307	25	substrate	substrate	NOUN
fuelectenerg-7534	307	26	.	.	PUNCT
fuelectenerg-7534	308	1	an	an	DET
fuelectenerg-7534	308	2	improvement	improvement	NOUN
fuelectenerg-7534	308	3	of	of	ADP
fuelectenerg-7534	308	4	the	the	DET
fuelectenerg-7534	308	5	basic	basic	ADJ
fuelectenerg-7534	308	6	bridge	bridge	NOUN
fuelectenerg-7534	308	7	cell	cell	NOUN
fuelectenerg-7534	308	8	loading	load	VERB
fuelectenerg-7534	308	9	the	the	DET
fuelectenerg-7534	308	10	transmission	transmission	NOUN
fuelectenerg-7534	308	11	line	line	NOUN
fuelectenerg-7534	308	12	is	be	AUX
fuelectenerg-7534	308	13	provided	provide	VERB
fuelectenerg-7534	308	14	by	by	ADP
fuelectenerg-7534	308	15	[	[	X
fuelectenerg-7534	308	16	79	79	NUM
fuelectenerg-7534	308	17	]	]	PUNCT
fuelectenerg-7534	308	18	.	.	PUNCT
fuelectenerg-7534	309	1	besides	besides	SCONJ
fuelectenerg-7534	309	2	the	the	DET
fuelectenerg-7534	309	3	standard	standard	ADJ
fuelectenerg-7534	309	4	actuation	actuation	NOUN
fuelectenerg-7534	309	5	electrode	electrode	NOUN
fuelectenerg-7534	309	6	,	,	PUNCT
fuelectenerg-7534	309	7	two	two	NUM
fuelectenerg-7534	309	8	additional	additional	ADJ
fuelectenerg-7534	309	9	electrodes	electrode	NOUN
fuelectenerg-7534	309	10	are	be	AUX
fuelectenerg-7534	309	11	introduced	introduce	VERB
fuelectenerg-7534	309	12	:	:	PUNCT
fuelectenerg-7534	309	13	each	each	DET
fuelectenerg-7534	309	14	one	one	NUM
fuelectenerg-7534	309	15	on	on	ADP
fuelectenerg-7534	309	16	a	a	DET
fuelectenerg-7534	309	17	side	side	NOUN
fuelectenerg-7534	309	18	of	of	ADP
fuelectenerg-7534	309	19	the	the	DET
fuelectenerg-7534	309	20	signal	signal	ADJ
fuelectenerg-7534	309	21	line	line	NOUN
fuelectenerg-7534	309	22	,	,	PUNCT
fuelectenerg-7534	309	23	on	on	ADP
fuelectenerg-7534	309	24	a	a	DET
fuelectenerg-7534	309	25	higher	high	ADJ
fuelectenerg-7534	309	26	pillar	pillar	NOUN
fuelectenerg-7534	309	27	.	.	PUNCT
fuelectenerg-7534	310	1	in	in	ADP
fuelectenerg-7534	310	2	this	this	DET
fuelectenerg-7534	310	3	manner	manner	NOUN
fuelectenerg-7534	310	4	,	,	PUNCT
fuelectenerg-7534	310	5	besides	besides	SCONJ
fuelectenerg-7534	310	6	nonactuation	nonactuation	NOUN
fuelectenerg-7534	310	7	state	state	NOUN
fuelectenerg-7534	310	8	,	,	PUNCT
fuelectenerg-7534	310	9	each	each	DET
fuelectenerg-7534	310	10	basic	basic	ADJ
fuelectenerg-7534	310	11	cell	cell	NOUN
fuelectenerg-7534	310	12	may	may	AUX
fuelectenerg-7534	310	13	achieve	achieve	VERB
fuelectenerg-7534	310	14	two	two	NUM
fuelectenerg-7534	310	15	different	different	ADJ
fuelectenerg-7534	310	16	capacitive	capacitive	ADJ
fuelectenerg-7534	310	17	states	state	NOUN
fuelectenerg-7534	310	18	,	,	PUNCT
fuelectenerg-7534	310	19	extending	extend	VERB
fuelectenerg-7534	310	20	its	its	PRON
fuelectenerg-7534	310	21	reconfigurability	reconfigurability	NOUN
fuelectenerg-7534	310	22	.	.	PUNCT
fuelectenerg-7534	311	1	by	by	ADP
fuelectenerg-7534	311	2	cascading	cascade	VERB
fuelectenerg-7534	311	3	32	32	NUM
fuelectenerg-7534	311	4	of	of	ADP
fuelectenerg-7534	311	5	such	such	ADJ
fuelectenerg-7534	311	6	cells	cell	NOUN
fuelectenerg-7534	311	7	,	,	PUNCT
fuelectenerg-7534	311	8	the	the	DET
fuelectenerg-7534	311	9	authors	author	NOUN
fuelectenerg-7534	311	10	propose	propose	VERB
fuelectenerg-7534	311	11	a	a	DET
fuelectenerg-7534	311	12	6	6	NUM
fuelectenerg-7534	311	13	-	-	PUNCT
fuelectenerg-7534	311	14	bit	bit	NOUN
fuelectenerg-7534	311	15	phase	phase	NOUN
fuelectenerg-7534	311	16	shifter	shifter	NOUN
fuelectenerg-7534	311	17	with	with	ADP
fuelectenerg-7534	311	18	a	a	DET
fuelectenerg-7534	311	19	maximum	maximum	ADJ
fuelectenerg-7534	311	20	shift	shift	NOUN
fuelectenerg-7534	311	21	of	of	ADP
fuelectenerg-7534	311	22	180	180	NUM
fuelectenerg-7534	311	23	°	°	NOUN
fuelectenerg-7534	311	24	,	,	PUNCT
fuelectenerg-7534	311	25	by	by	ADP
fuelectenerg-7534	311	26	5.625	5.625	NUM
fuelectenerg-7534	311	27	°	°	NOUN
fuelectenerg-7534	311	28	steps	step	NOUN
fuelectenerg-7534	311	29	.	.	PUNCT
fuelectenerg-7534	312	1	characterized	characterize	VERB
fuelectenerg-7534	312	2	by	by	ADP
fuelectenerg-7534	312	3	reasonably	reasonably	ADV
fuelectenerg-7534	312	4	low	low	ADJ
fuelectenerg-7534	312	5	actuation	actuation	NOUN
fuelectenerg-7534	312	6	voltages	voltage	NOUN
fuelectenerg-7534	312	7	(	(	PUNCT
fuelectenerg-7534	312	8	6.8	6.8	NUM
fuelectenerg-7534	312	9	and	and	CCONJ
fuelectenerg-7534	312	10	3.4	3.4	NUM
fuelectenerg-7534	312	11	v	v	NOUN
fuelectenerg-7534	312	12	)	)	PUNCT
fuelectenerg-7534	312	13	,	,	PUNCT
fuelectenerg-7534	312	14	the	the	DET
fuelectenerg-7534	312	15	device	device	NOUN
fuelectenerg-7534	312	16	exhibits	exhibit	VERB
fuelectenerg-7534	312	17	an	an	DET
fuelectenerg-7534	312	18	overall	overall	ADJ
fuelectenerg-7534	312	19	length	length	NOUN
fuelectenerg-7534	312	20	of	of	ADP
fuelectenerg-7534	312	21	12.8	12.8	NUM
fuelectenerg-7534	312	22	mm	mm	NOUN
fuelectenerg-7534	312	23	.	.	PUNCT
fuelectenerg-7534	313	1	additional	additional	ADJ
fuelectenerg-7534	313	2	remarkable	remarkable	ADJ
fuelectenerg-7534	313	3	works	work	NOUN
fuelectenerg-7534	313	4	are	be	AUX
fuelectenerg-7534	313	5	represented	represent	VERB
fuelectenerg-7534	313	6	by	by	ADP
fuelectenerg-7534	313	7	[	[	NOUN
fuelectenerg-7534	313	8	80][81][82	80][81][82	NUM
fuelectenerg-7534	313	9	]	]	PUNCT
fuelectenerg-7534	313	10	,	,	PUNCT
fuelectenerg-7534	313	11	comprising	comprise	VERB
fuelectenerg-7534	313	12	dmtl	dmtl	NOUN
fuelectenerg-7534	313	13	configurations	configuration	NOUN
fuelectenerg-7534	313	14	working	work	VERB
fuelectenerg-7534	313	15	in	in	ADP
fuelectenerg-7534	313	16	the	the	DET
fuelectenerg-7534	313	17	part	part	NOUN
fuelectenerg-7534	313	18	of	of	ADP
fuelectenerg-7534	313	19	spectrum	spectrum	NOUN
fuelectenerg-7534	313	20	from	from	ADP
fuelectenerg-7534	313	21	x	x	X
fuelectenerg-7534	313	22	band	band	NOUN
fuelectenerg-7534	313	23	to	to	ADP
fuelectenerg-7534	313	24	60	60	NUM
fuelectenerg-7534	313	25	ghz	ghz	NOUN
fuelectenerg-7534	313	26	,	,	PUNCT
fuelectenerg-7534	313	27	with	with	ADP
fuelectenerg-7534	313	28	considerably	considerably	ADV
fuelectenerg-7534	313	29	small	small	ADJ
fuelectenerg-7534	313	30	losses	loss	NOUN
fuelectenerg-7534	313	31	and	and	CCONJ
fuelectenerg-7534	313	32	phase	phase	NOUN
fuelectenerg-7534	313	33	error	error	NOUN
fuelectenerg-7534	313	34	,	,	PUNCT
fuelectenerg-7534	313	35	investigated	investigate	VERB
fuelectenerg-7534	313	36	in	in	ADP
fuelectenerg-7534	313	37	depth	depth	NOUN
fuelectenerg-7534	313	38	also	also	ADV
fuelectenerg-7534	313	39	in	in	ADP
fuelectenerg-7534	313	40	terms	term	NOUN
fuelectenerg-7534	313	41	of	of	ADP
fuelectenerg-7534	313	42	reliability	reliability	NOUN
fuelectenerg-7534	313	43	.	.	PUNCT
fuelectenerg-7534	314	1	(	(	PUNCT
fuelectenerg-7534	314	2	a	a	X
fuelectenerg-7534	314	3	)	)	PUNCT
fuelectenerg-7534	314	4	(	(	PUNCT
fuelectenerg-7534	314	5	b	b	X
fuelectenerg-7534	314	6	)	)	PUNCT
fuelectenerg-7534	314	7	(	(	PUNCT
fuelectenerg-7534	314	8	c	c	X
fuelectenerg-7534	314	9	)	)	PUNCT
fuelectenerg-7534	314	10	350	350	NUM
fuelectenerg-7534	314	11	g.	g.	NOUN
fuelectenerg-7534	314	12	tagliapietra	tagliapietra	PROPN
fuelectenerg-7534	314	13	,	,	PUNCT
fuelectenerg-7534	314	14	j.	j.	PROPN
fuelectenerg-7534	314	15	iannacci	iannacci	PROPN
fuelectenerg-7534	314	16	a	a	DET
fuelectenerg-7534	314	17	more	more	ADV
fuelectenerg-7534	314	18	compact	compact	ADJ
fuelectenerg-7534	314	19	and	and	CCONJ
fuelectenerg-7534	314	20	innovative	innovative	ADJ
fuelectenerg-7534	314	21	design	design	NOUN
fuelectenerg-7534	314	22	is	be	AUX
fuelectenerg-7534	314	23	proposed	propose	VERB
fuelectenerg-7534	314	24	in	in	ADP
fuelectenerg-7534	314	25	[	[	X
fuelectenerg-7534	314	26	83	83	NUM
fuelectenerg-7534	314	27	]	]	PUNCT
fuelectenerg-7534	314	28	,	,	PUNCT
fuelectenerg-7534	314	29	with	with	ADP
fuelectenerg-7534	314	30	two	two	NUM
fuelectenerg-7534	314	31	horizontal	horizontal	ADJ
fuelectenerg-7534	314	32	parallel	parallel	ADJ
fuelectenerg-7534	314	33	fixed	fix	VERB
fuelectenerg-7534	314	34	plates	plate	NOUN
fuelectenerg-7534	314	35	:	:	PUNCT
fuelectenerg-7534	314	36	the	the	DET
fuelectenerg-7534	314	37	lower	low	ADJ
fuelectenerg-7534	314	38	is	be	AUX
fuelectenerg-7534	314	39	the	the	DET
fuelectenerg-7534	314	40	base	base	NOUN
fuelectenerg-7534	314	41	for	for	ADP
fuelectenerg-7534	314	42	the	the	DET
fuelectenerg-7534	314	43	dielectric	dielectric	NOUN
fuelectenerg-7534	314	44	of	of	ADP
fuelectenerg-7534	314	45	the	the	DET
fuelectenerg-7534	314	46	cpw	cpw	NOUN
fuelectenerg-7534	314	47	,	,	PUNCT
fuelectenerg-7534	314	48	while	while	SCONJ
fuelectenerg-7534	314	49	the	the	DET
fuelectenerg-7534	314	50	upper	upper	NOUN
fuelectenerg-7534	314	51	is	be	AUX
fuelectenerg-7534	314	52	the	the	DET
fuelectenerg-7534	314	53	support	support	NOUN
fuelectenerg-7534	314	54	to	to	PART
fuelectenerg-7534	314	55	which	which	PRON
fuelectenerg-7534	314	56	a	a	DET
fuelectenerg-7534	314	57	piezoelectric	piezoelectric	ADJ
fuelectenerg-7534	314	58	transducer	transducer	NOUN
fuelectenerg-7534	314	59	is	be	AUX
fuelectenerg-7534	314	60	attached	attach	VERB
fuelectenerg-7534	314	61	.	.	PUNCT
fuelectenerg-7534	315	1	as	as	SCONJ
fuelectenerg-7534	315	2	it	it	PRON
fuelectenerg-7534	315	3	is	be	AUX
fuelectenerg-7534	315	4	shown	show	VERB
fuelectenerg-7534	315	5	in	in	ADP
fuelectenerg-7534	315	6	figure	figure	NOUN
fuelectenerg-7534	315	7	6a	6a	NOUN
fuelectenerg-7534	315	8	,	,	PUNCT
fuelectenerg-7534	315	9	on	on	ADP
fuelectenerg-7534	315	10	the	the	DET
fuelectenerg-7534	315	11	lower	low	ADJ
fuelectenerg-7534	315	12	side	side	NOUN
fuelectenerg-7534	315	13	of	of	ADP
fuelectenerg-7534	315	14	the	the	DET
fuelectenerg-7534	315	15	transducer	transducer	NOUN
fuelectenerg-7534	315	16	,	,	PUNCT
fuelectenerg-7534	315	17	a	a	DET
fuelectenerg-7534	315	18	slab	slab	NOUN
fuelectenerg-7534	315	19	with	with	ADP
fuelectenerg-7534	315	20	high	high	ADJ
fuelectenerg-7534	315	21	dielectric	dielectric	ADJ
fuelectenerg-7534	315	22	constant	constant	ADJ
fuelectenerg-7534	315	23	is	be	AUX
fuelectenerg-7534	315	24	stuck	stick	VERB
fuelectenerg-7534	315	25	.	.	PUNCT
fuelectenerg-7534	316	1	the	the	DET
fuelectenerg-7534	316	2	35	35	NUM
fuelectenerg-7534	316	3	μm	μm	NOUN
fuelectenerg-7534	316	4	air	air	NOUN
fuelectenerg-7534	316	5	gap	gap	NOUN
fuelectenerg-7534	316	6	separating	separate	VERB
fuelectenerg-7534	316	7	the	the	DET
fuelectenerg-7534	316	8	slab	slab	NOUN
fuelectenerg-7534	316	9	from	from	ADP
fuelectenerg-7534	316	10	the	the	DET
fuelectenerg-7534	316	11	underlying	underlie	VERB
fuelectenerg-7534	316	12	cpw	cpw	NOUN
fuelectenerg-7534	316	13	is	be	AUX
fuelectenerg-7534	316	14	varied	vary	VERB
fuelectenerg-7534	316	15	by	by	ADP
fuelectenerg-7534	316	16	the	the	DET
fuelectenerg-7534	316	17	transducer	transducer	NOUN
fuelectenerg-7534	316	18	,	,	PUNCT
fuelectenerg-7534	316	19	inducing	induce	VERB
fuelectenerg-7534	316	20	broad	broad	ADJ
fuelectenerg-7534	316	21	changes	change	NOUN
fuelectenerg-7534	316	22	of	of	ADP
fuelectenerg-7534	316	23	load	load	NOUN
fuelectenerg-7534	316	24	(	(	PUNCT
fuelectenerg-7534	316	25	and	and	CCONJ
fuelectenerg-7534	316	26	thus	thus	ADV
fuelectenerg-7534	316	27	phase	phase	NOUN
fuelectenerg-7534	316	28	delay	delay	NOUN
fuelectenerg-7534	316	29	)	)	PUNCT
fuelectenerg-7534	316	30	on	on	ADP
fuelectenerg-7534	316	31	the	the	DET
fuelectenerg-7534	316	32	signal	signal	ADJ
fuelectenerg-7534	316	33	line	line	NOUN
fuelectenerg-7534	316	34	.	.	PUNCT
fuelectenerg-7534	317	1	in	in	ADP
fuelectenerg-7534	317	2	order	order	NOUN
fuelectenerg-7534	317	3	to	to	PART
fuelectenerg-7534	317	4	extend	extend	VERB
fuelectenerg-7534	317	5	the	the	DET
fuelectenerg-7534	317	6	achievable	achievable	ADJ
fuelectenerg-7534	317	7	phase	phase	NOUN
fuelectenerg-7534	317	8	shift	shift	NOUN
fuelectenerg-7534	317	9	,	,	PUNCT
fuelectenerg-7534	317	10	a	a	DET
fuelectenerg-7534	317	11	grating	grating	NOUN
fuelectenerg-7534	317	12	and	and	CCONJ
fuelectenerg-7534	317	13	a	a	DET
fuelectenerg-7534	317	14	serpentine	serpentine	ADJ
fuelectenerg-7534	317	15	shaped	shape	VERB
fuelectenerg-7534	317	16	cpw	cpw	NOUN
fuelectenerg-7534	317	17	line	line	NOUN
fuelectenerg-7534	317	18	have	have	AUX
fuelectenerg-7534	317	19	been	be	AUX
fuelectenerg-7534	317	20	investigated	investigate	VERB
fuelectenerg-7534	317	21	,	,	PUNCT
fuelectenerg-7534	317	22	besides	besides	SCONJ
fuelectenerg-7534	317	23	standard	standard	ADJ
fuelectenerg-7534	317	24	straight	straight	ADJ
fuelectenerg-7534	317	25	cpw	cpw	NOUN
fuelectenerg-7534	317	26	configuration	configuration	NOUN
fuelectenerg-7534	317	27	.	.	PUNCT
fuelectenerg-7534	318	1	with	with	ADP
fuelectenerg-7534	318	2	an	an	DET
fuelectenerg-7534	318	3	overall	overall	ADJ
fuelectenerg-7534	318	4	length	length	NOUN
fuelectenerg-7534	318	5	of	of	ADP
fuelectenerg-7534	318	6	3	3	NUM
fuelectenerg-7534	318	7	mm	mm	NOUN
fuelectenerg-7534	318	8	,	,	PUNCT
fuelectenerg-7534	318	9	the	the	DET
fuelectenerg-7534	318	10	device	device	NOUN
fuelectenerg-7534	318	11	is	be	AUX
fuelectenerg-7534	318	12	fabricated	fabricate	VERB
fuelectenerg-7534	318	13	on	on	ADP
fuelectenerg-7534	318	14	simple	simple	ADJ
fuelectenerg-7534	318	15	high	high	ADJ
fuelectenerg-7534	318	16	-	-	PUNCT
fuelectenerg-7534	318	17	resistance	resistance	NOUN
fuelectenerg-7534	318	18	silicon	silicon	NOUN
fuelectenerg-7534	318	19	.	.	PUNCT
fuelectenerg-7534	319	1	as	as	SCONJ
fuelectenerg-7534	319	2	compared	compare	VERB
fuelectenerg-7534	319	3	to	to	ADP
fuelectenerg-7534	319	4	previous	previous	ADJ
fuelectenerg-7534	319	5	designs	design	NOUN
fuelectenerg-7534	319	6	,	,	PUNCT
fuelectenerg-7534	319	7	an	an	DET
fuelectenerg-7534	319	8	arrangement	arrangement	NOUN
fuelectenerg-7534	319	9	that	that	PRON
fuelectenerg-7534	319	10	permits	permit	VERB
fuelectenerg-7534	319	11	to	to	PART
fuelectenerg-7534	319	12	drastically	drastically	ADV
fuelectenerg-7534	319	13	reduce	reduce	VERB
fuelectenerg-7534	319	14	the	the	DET
fuelectenerg-7534	319	15	aspect	aspect	NOUN
fuelectenerg-7534	319	16	ratio	ratio	NOUN
fuelectenerg-7534	319	17	of	of	ADP
fuelectenerg-7534	319	18	the	the	DET
fuelectenerg-7534	319	19	overall	overall	ADJ
fuelectenerg-7534	319	20	device	device	NOUN
fuelectenerg-7534	319	21	is	be	AUX
fuelectenerg-7534	319	22	presented	present	VERB
fuelectenerg-7534	319	23	in	in	ADP
fuelectenerg-7534	319	24	[	[	X
fuelectenerg-7534	319	25	85	85	NUM
fuelectenerg-7534	319	26	]	]	PUNCT
fuelectenerg-7534	319	27	.	.	PUNCT
fuelectenerg-7534	320	1	in	in	ADP
fuelectenerg-7534	320	2	this	this	DET
fuelectenerg-7534	320	3	case	case	NOUN
fuelectenerg-7534	320	4	,	,	PUNCT
fuelectenerg-7534	320	5	a	a	DET
fuelectenerg-7534	320	6	5	5	NUM
fuelectenerg-7534	320	7	-	-	PUNCT
fuelectenerg-7534	320	8	bit	bit	NOUN
fuelectenerg-7534	320	9	phase	phase	NOUN
fuelectenerg-7534	320	10	shifter	shifter	NOUN
fuelectenerg-7534	320	11	is	be	AUX
fuelectenerg-7534	320	12	implemented	implement	VERB
fuelectenerg-7534	320	13	by	by	ADP
fuelectenerg-7534	320	14	a	a	DET
fuelectenerg-7534	320	15	spiral	spiral	ADJ
fuelectenerg-7534	320	16	-	-	PUNCT
fuelectenerg-7534	320	17	shaped	shape	VERB
fuelectenerg-7534	320	18	cpw	cpw	NOUN
fuelectenerg-7534	320	19	configuration	configuration	NOUN
fuelectenerg-7534	320	20	of	of	ADP
fuelectenerg-7534	320	21	the	the	DET
fuelectenerg-7534	320	22	signal	signal	ADJ
fuelectenerg-7534	320	23	line	line	NOUN
fuelectenerg-7534	320	24	and	and	CCONJ
fuelectenerg-7534	320	25	loaded	load	VERB
fuelectenerg-7534	320	26	with	with	ADP
fuelectenerg-7534	320	27	31	31	NUM
fuelectenerg-7534	320	28	capacitive	capacitive	ADJ
fuelectenerg-7534	320	29	mems	mem	NOUN
fuelectenerg-7534	320	30	switches	switch	NOUN
fuelectenerg-7534	320	31	,	,	PUNCT
fuelectenerg-7534	320	32	as	as	SCONJ
fuelectenerg-7534	320	33	depicted	depict	VERB
fuelectenerg-7534	320	34	in	in	ADP
fuelectenerg-7534	320	35	figure	figure	NOUN
fuelectenerg-7534	320	36	6c	6c	NOUN
fuelectenerg-7534	320	37	.	.	PUNCT
fuelectenerg-7534	321	1	the	the	DET
fuelectenerg-7534	321	2	actuation	actuation	NOUN
fuelectenerg-7534	321	3	of	of	ADP
fuelectenerg-7534	321	4	switches	switch	NOUN
fuelectenerg-7534	321	5	takes	take	VERB
fuelectenerg-7534	321	6	place	place	NOUN
fuelectenerg-7534	321	7	by	by	ADP
fuelectenerg-7534	321	8	groups	group	NOUN
fuelectenerg-7534	321	9	.	.	PUNCT
fuelectenerg-7534	322	1	in	in	ADP
fuelectenerg-7534	322	2	details	detail	NOUN
fuelectenerg-7534	322	3	,	,	PUNCT
fuelectenerg-7534	322	4	the	the	DET
fuelectenerg-7534	322	5	switches	switch	NOUN
fuelectenerg-7534	322	6	are	be	AUX
fuelectenerg-7534	322	7	divided	divide	VERB
fuelectenerg-7534	322	8	into	into	ADP
fuelectenerg-7534	322	9	five	five	NUM
fuelectenerg-7534	322	10	groups	group	NOUN
fuelectenerg-7534	322	11	,	,	PUNCT
fuelectenerg-7534	322	12	involving	involve	VERB
fuelectenerg-7534	322	13	shifts	shift	NOUN
fuelectenerg-7534	322	14	of	of	ADP
fuelectenerg-7534	322	15	11.25	11.25	NUM
fuelectenerg-7534	322	16	°	°	NOUN
fuelectenerg-7534	322	17	,	,	PUNCT
fuelectenerg-7534	322	18	22.5	22.5	NUM
fuelectenerg-7534	322	19	°	°	NOUN
fuelectenerg-7534	322	20	,	,	PUNCT
fuelectenerg-7534	322	21	45	45	NUM
fuelectenerg-7534	322	22	°	°	NOUN
fuelectenerg-7534	322	23	,	,	PUNCT
fuelectenerg-7534	322	24	90	90	NUM
fuelectenerg-7534	322	25	°	°	NUM
fuelectenerg-7534	322	26	and	and	CCONJ
fuelectenerg-7534	322	27	180	180	NUM
fuelectenerg-7534	322	28	°	°	NOUN
fuelectenerg-7534	322	29	.	.	PUNCT
fuelectenerg-7534	323	1	the	the	DET
fuelectenerg-7534	323	2	device	device	NOUN
fuelectenerg-7534	323	3	has	have	VERB
fuelectenerg-7534	323	4	a	a	DET
fuelectenerg-7534	323	5	remarkable	remarkable	ADJ
fuelectenerg-7534	323	6	footprint	footprint	NOUN
fuelectenerg-7534	323	7	of	of	ADP
fuelectenerg-7534	323	8	2.6x2.6	2.6x2.6	NUM
fuelectenerg-7534	323	9	mm2	mm2	NOUN
fuelectenerg-7534	323	10	.	.	PUNCT
fuelectenerg-7534	324	1	one	one	NUM
fuelectenerg-7534	324	2	last	last	ADJ
fuelectenerg-7534	324	3	proposal	proposal	NOUN
fuelectenerg-7534	324	4	to	to	PART
fuelectenerg-7534	324	5	be	be	AUX
fuelectenerg-7534	324	6	mentioned	mention	VERB
fuelectenerg-7534	324	7	about	about	ADP
fuelectenerg-7534	324	8	dmtl	dmtl	NOUN
fuelectenerg-7534	324	9	phase	phase	NOUN
fuelectenerg-7534	324	10	shifters	shifter	NOUN
fuelectenerg-7534	324	11	is	be	AUX
fuelectenerg-7534	324	12	[	[	X
fuelectenerg-7534	324	13	84	84	NUM
fuelectenerg-7534	324	14	]	]	PUNCT
fuelectenerg-7534	324	15	.	.	PUNCT
fuelectenerg-7534	325	1	in	in	ADP
fuelectenerg-7534	325	2	this	this	DET
fuelectenerg-7534	325	3	work	work	NOUN
fuelectenerg-7534	325	4	,	,	PUNCT
fuelectenerg-7534	325	5	two	two	NUM
fuelectenerg-7534	325	6	compact	compact	ADJ
fuelectenerg-7534	325	7	devices	device	NOUN
fuelectenerg-7534	325	8	(	(	PUNCT
fuelectenerg-7534	325	9	3	3	NUM
fuelectenerg-7534	325	10	and	and	CCONJ
fuelectenerg-7534	325	11	4	4	NUM
fuelectenerg-7534	325	12	-	-	PUNCT
fuelectenerg-7534	325	13	bit	bit	NOUN
fuelectenerg-7534	325	14	)	)	PUNCT
fuelectenerg-7534	325	15	are	be	AUX
fuelectenerg-7534	325	16	proposed	propose	VERB
fuelectenerg-7534	325	17	,	,	PUNCT
fuelectenerg-7534	325	18	both	both	PRON
fuelectenerg-7534	325	19	exploiting	exploit	VERB
fuelectenerg-7534	325	20	the	the	DET
fuelectenerg-7534	325	21	advantages	advantage	NOUN
fuelectenerg-7534	325	22	of	of	ADP
fuelectenerg-7534	325	23	combining	combine	VERB
fuelectenerg-7534	325	24	switched	switch	VERB
fuelectenerg-7534	325	25	-	-	PUNCT
fuelectenerg-7534	325	26	line	line	NOUN
fuelectenerg-7534	325	27	and	and	CCONJ
fuelectenerg-7534	325	28	dmtl	dmtl	NOUN
fuelectenerg-7534	325	29	topologies	topology	NOUN
fuelectenerg-7534	325	30	.	.	PUNCT
fuelectenerg-7534	326	1	in	in	ADP
fuelectenerg-7534	326	2	case	case	NOUN
fuelectenerg-7534	326	3	of	of	ADP
fuelectenerg-7534	326	4	the	the	DET
fuelectenerg-7534	326	5	3	3	NUM
fuelectenerg-7534	326	6	-	-	PUNCT
fuelectenerg-7534	326	7	bit	bit	NOUN
fuelectenerg-7534	326	8	device	device	NOUN
fuelectenerg-7534	326	9	,	,	PUNCT
fuelectenerg-7534	326	10	two	two	NUM
fuelectenerg-7534	326	11	bits	bit	NOUN
fuelectenerg-7534	326	12	control	control	VERB
fuelectenerg-7534	326	13	the	the	DET
fuelectenerg-7534	326	14	sp4	sp4	NOUN
fuelectenerg-7534	326	15	t	t	PROPN
fuelectenerg-7534	326	16	switches	switch	NOUN
fuelectenerg-7534	326	17	(	(	PUNCT
fuelectenerg-7534	326	18	selecting	select	VERB
fuelectenerg-7534	326	19	one	one	NUM
fuelectenerg-7534	326	20	of	of	ADP
fuelectenerg-7534	326	21	the	the	DET
fuelectenerg-7534	326	22	four	four	NUM
fuelectenerg-7534	326	23	delay	delay	NOUN
fuelectenerg-7534	326	24	lines	line	NOUN
fuelectenerg-7534	326	25	)	)	PUNCT
fuelectenerg-7534	326	26	,	,	PUNCT
fuelectenerg-7534	326	27	while	while	SCONJ
fuelectenerg-7534	326	28	one	one	NUM
fuelectenerg-7534	326	29	bit	bit	NOUN
fuelectenerg-7534	326	30	controls	control	VERB
fuelectenerg-7534	326	31	capacitive	capacitive	ADJ
fuelectenerg-7534	326	32	bridges	bridge	NOUN
fuelectenerg-7534	326	33	loading	load	VERB
fuelectenerg-7534	326	34	the	the	DET
fuelectenerg-7534	326	35	lines	line	NOUN
fuelectenerg-7534	326	36	.	.	PUNCT
fuelectenerg-7534	327	1	the	the	DET
fuelectenerg-7534	327	2	same	same	ADJ
fuelectenerg-7534	327	3	principle	principle	NOUN
fuelectenerg-7534	327	4	applies	apply	VERB
fuelectenerg-7534	327	5	to	to	ADP
fuelectenerg-7534	327	6	the	the	DET
fuelectenerg-7534	327	7	4	4	NUM
fuelectenerg-7534	327	8	-	-	PUNCT
fuelectenerg-7534	327	9	bit	bit	NOUN
fuelectenerg-7534	327	10	version	version	NOUN
fuelectenerg-7534	327	11	displayed	display	VERB
fuelectenerg-7534	327	12	in	in	ADP
fuelectenerg-7534	327	13	figure	figure	NOUN
fuelectenerg-7534	327	14	6b	6b	NOUN
fuelectenerg-7534	327	15	.	.	PUNCT
fuelectenerg-7534	328	1	both	both	DET
fuelectenerg-7534	328	2	devices	device	NOUN
fuelectenerg-7534	328	3	are	be	AUX
fuelectenerg-7534	328	4	designed	design	VERB
fuelectenerg-7534	328	5	to	to	PART
fuelectenerg-7534	328	6	operate	operate	VERB
fuelectenerg-7534	328	7	in	in	ADP
fuelectenerg-7534	328	8	ka	ka	PROPN
fuelectenerg-7534	328	9	band	band	PROPN
fuelectenerg-7534	328	10	,	,	PUNCT
fuelectenerg-7534	328	11	at	at	ADP
fuelectenerg-7534	328	12	35	35	NUM
fuelectenerg-7534	328	13	ghz	ghz	NOUN
fuelectenerg-7534	328	14	,	,	PUNCT
fuelectenerg-7534	328	15	showing	show	VERB
fuelectenerg-7534	328	16	valuable	valuable	ADJ
fuelectenerg-7534	328	17	maximum	maximum	ADJ
fuelectenerg-7534	328	18	return	return	NOUN
fuelectenerg-7534	328	19	loss	loss	NOUN
fuelectenerg-7534	328	20	(	(	PUNCT
fuelectenerg-7534	328	21	<	<	X
fuelectenerg-7534	328	22	-12	-12	PRON
fuelectenerg-7534	328	23	db	db	PROPN
fuelectenerg-7534	328	24	)	)	PUNCT
fuelectenerg-7534	328	25	,	,	PUNCT
fuelectenerg-7534	328	26	contained	contain	VERB
fuelectenerg-7534	328	27	phase	phase	NOUN
fuelectenerg-7534	328	28	error	error	NOUN
fuelectenerg-7534	328	29	(	(	PUNCT
fuelectenerg-7534	328	30	<	<	X
fuelectenerg-7534	328	31	3.8	3.8	NUM
fuelectenerg-7534	328	32	°	°	NUM
fuelectenerg-7534	328	33	)	)	PUNCT
fuelectenerg-7534	328	34	,	,	PUNCT
fuelectenerg-7534	328	35	and	and	CCONJ
fuelectenerg-7534	328	36	compact	compact	ADJ
fuelectenerg-7534	328	37	sizes	size	NOUN
fuelectenerg-7534	328	38	of	of	ADP
fuelectenerg-7534	328	39	2.24x1.91	2.24x1.91	PROPN
fuelectenerg-7534	328	40	mm2	mm2	NOUN
fuelectenerg-7534	328	41	and	and	CCONJ
fuelectenerg-7534	328	42	2.78x2.69	2.78x2.69	NUM
fuelectenerg-7534	328	43	mm2	mm2	NOUN
fuelectenerg-7534	328	44	,	,	PUNCT
fuelectenerg-7534	328	45	respectively	respectively	ADV
fuelectenerg-7534	328	46	.	.	PUNCT
fuelectenerg-7534	329	1	moreover	moreover	ADV
fuelectenerg-7534	329	2	,	,	PUNCT
fuelectenerg-7534	329	3	both	both	DET
fuelectenerg-7534	329	4	devices	device	NOUN
fuelectenerg-7534	329	5	exhibit	exhibit	VERB
fuelectenerg-7534	329	6	a	a	DET
fuelectenerg-7534	329	7	low	low	ADJ
fuelectenerg-7534	329	8	aspect	aspect	NOUN
fuelectenerg-7534	329	9	ratio	ratio	NOUN
fuelectenerg-7534	329	10	.	.	PUNCT
fuelectenerg-7534	330	1	devices	device	NOUN
fuelectenerg-7534	330	2	have	have	AUX
fuelectenerg-7534	330	3	been	be	AUX
fuelectenerg-7534	330	4	evaluated	evaluate	VERB
fuelectenerg-7534	330	5	also	also	ADV
fuelectenerg-7534	330	6	in	in	ADP
fuelectenerg-7534	330	7	terms	term	NOUN
fuelectenerg-7534	330	8	of	of	ADP
fuelectenerg-7534	330	9	reliability	reliability	NOUN
fuelectenerg-7534	330	10	,	,	PUNCT
fuelectenerg-7534	330	11	sustaining	sustain	VERB
fuelectenerg-7534	330	12	more	more	ADJ
fuelectenerg-7534	330	13	than	than	ADP
fuelectenerg-7534	330	14	1	1	NUM
fuelectenerg-7534	330	15	billion	billion	NUM
fuelectenerg-7534	330	16	cycles	cycle	NOUN
fuelectenerg-7534	330	17	with	with	ADP
fuelectenerg-7534	330	18	0.1	0.1	NUM
fuelectenerg-7534	330	19	w	w	NOUN
fuelectenerg-7534	330	20	of	of	ADP
fuelectenerg-7534	330	21	rf	rf	NOUN
fuelectenerg-7534	330	22	power	power	NOUN
fuelectenerg-7534	330	23	in	in	ADP
fuelectenerg-7534	330	24	cold	cold	ADJ
fuelectenerg-7534	330	25	switching	switching	NOUN
fuelectenerg-7534	330	26	conditions	condition	NOUN
fuelectenerg-7534	330	27	,	,	PUNCT
fuelectenerg-7534	330	28	and	and	CCONJ
fuelectenerg-7534	330	29	more	more	ADJ
fuelectenerg-7534	330	30	than	than	ADP
fuelectenerg-7534	330	31	400	400	NUM
fuelectenerg-7534	330	32	million	million	NUM
fuelectenerg-7534	330	33	cycles	cycle	NOUN
fuelectenerg-7534	330	34	with	with	ADP
fuelectenerg-7534	330	35	0.5	0.5	NUM
fuelectenerg-7534	330	36	w	w	NOUN
fuelectenerg-7534	330	37	in	in	ADP
fuelectenerg-7534	330	38	hot	hot	ADJ
fuelectenerg-7534	330	39	switching	switching	NOUN
fuelectenerg-7534	330	40	conditions	condition	NOUN
fuelectenerg-7534	330	41	(	(	PUNCT
fuelectenerg-7534	330	42	85	85	NUM
fuelectenerg-7534	330	43	°	°	NUM
fuelectenerg-7534	330	44	c	c	NOUN
fuelectenerg-7534	330	45	)	)	PUNCT
fuelectenerg-7534	330	46	.	.	PUNCT
fuelectenerg-7534	331	1	in	in	ADP
fuelectenerg-7534	331	2	addition	addition	NOUN
fuelectenerg-7534	331	3	,	,	PUNCT
fuelectenerg-7534	331	4	the	the	DET
fuelectenerg-7534	331	5	inclusion	inclusion	NOUN
fuelectenerg-7534	331	6	of	of	ADP
fuelectenerg-7534	331	7	the	the	DET
fuelectenerg-7534	331	8	two	two	NUM
fuelectenerg-7534	331	9	phase	phase	NOUN
fuelectenerg-7534	331	10	shifters	shifter	NOUN
fuelectenerg-7534	331	11	within	within	ADP
fuelectenerg-7534	331	12	a	a	DET
fuelectenerg-7534	331	13	low	low	ADJ
fuelectenerg-7534	331	14	cost	cost	NOUN
fuelectenerg-7534	331	15	package	package	NOUN
fuelectenerg-7534	331	16	has	have	AUX
fuelectenerg-7534	331	17	been	be	AUX
fuelectenerg-7534	331	18	accurately	accurately	ADV
fuelectenerg-7534	331	19	characterized	characterize	VERB
fuelectenerg-7534	331	20	.	.	PUNCT
fuelectenerg-7534	332	1	4.4	4.4	NUM
fuelectenerg-7534	332	2	.	.	PUNCT
fuelectenerg-7534	333	1	reflection	reflection	NOUN
fuelectenerg-7534	333	2	type	type	NOUN
fuelectenerg-7534	333	3	regarding	regard	VERB
fuelectenerg-7534	333	4	the	the	DET
fuelectenerg-7534	333	5	reflection	reflection	NOUN
fuelectenerg-7534	333	6	type	type	NOUN
fuelectenerg-7534	333	7	architecture	architecture	NOUN
fuelectenerg-7534	333	8	,	,	PUNCT
fuelectenerg-7534	333	9	research	research	NOUN
fuelectenerg-7534	333	10	contributions	contribution	NOUN
fuelectenerg-7534	333	11	in	in	ADP
fuelectenerg-7534	333	12	the	the	DET
fuelectenerg-7534	333	13	last	last	ADJ
fuelectenerg-7534	333	14	decade	decade	NOUN
fuelectenerg-7534	333	15	mainly	mainly	ADV
fuelectenerg-7534	333	16	focused	focus	VERB
fuelectenerg-7534	333	17	on	on	ADP
fuelectenerg-7534	333	18	the	the	DET
fuelectenerg-7534	333	19	improvement	improvement	NOUN
fuelectenerg-7534	333	20	of	of	ADP
fuelectenerg-7534	333	21	both	both	PRON
fuelectenerg-7534	333	22	quadrature	quadrature	NOUN
fuelectenerg-7534	333	23	coupler	coupler	NOUN
fuelectenerg-7534	333	24	and	and	CCONJ
fuelectenerg-7534	333	25	reflective	reflective	ADJ
fuelectenerg-7534	333	26	loads	load	NOUN
fuelectenerg-7534	333	27	.	.	PUNCT
fuelectenerg-7534	334	1	some	some	DET
fuelectenerg-7534	334	2	noteworthy	noteworthy	ADJ
fuelectenerg-7534	334	3	contributions	contribution	NOUN
fuelectenerg-7534	334	4	are	be	AUX
fuelectenerg-7534	334	5	represented	represent	VERB
fuelectenerg-7534	334	6	by	by	ADP
fuelectenerg-7534	334	7	[	[	X
fuelectenerg-7534	334	8	86][87][88	86][87][88	NOUN
fuelectenerg-7534	334	9	]	]	PUNCT
fuelectenerg-7534	334	10	.	.	PUNCT
fuelectenerg-7534	335	1	in	in	ADP
fuelectenerg-7534	335	2	the	the	DET
fuelectenerg-7534	335	3	first	first	ADJ
fuelectenerg-7534	335	4	one	one	NUM
fuelectenerg-7534	335	5	,	,	PUNCT
fuelectenerg-7534	335	6	a	a	DET
fuelectenerg-7534	335	7	2	2	NUM
fuelectenerg-7534	335	8	-	-	PUNCT
fuelectenerg-7534	335	9	bit	bit	NOUN
fuelectenerg-7534	335	10	device	device	NOUN
fuelectenerg-7534	335	11	composed	compose	VERB
fuelectenerg-7534	335	12	by	by	ADP
fuelectenerg-7534	335	13	two	two	NUM
fuelectenerg-7534	335	14	directional	directional	ADJ
fuelectenerg-7534	335	15	couplers	coupler	NOUN
fuelectenerg-7534	335	16	(	(	PUNCT
fuelectenerg-7534	335	17	3db	3db	ADJ
fuelectenerg-7534	335	18	branch	branch	NOUN
fuelectenerg-7534	335	19	line	line	NOUN
fuelectenerg-7534	335	20	)	)	PUNCT
fuelectenerg-7534	335	21	and	and	CCONJ
fuelectenerg-7534	335	22	four	four	NUM
fuelectenerg-7534	335	23	loads	load	NOUN
fuelectenerg-7534	335	24	is	be	AUX
fuelectenerg-7534	335	25	presented	present	VERB
fuelectenerg-7534	335	26	.	.	PUNCT
fuelectenerg-7534	336	1	activation	activation	NOUN
fuelectenerg-7534	336	2	of	of	ADP
fuelectenerg-7534	336	3	loads	load	NOUN
fuelectenerg-7534	336	4	connected	connect	VERB
fuelectenerg-7534	336	5	to	to	ADP
fuelectenerg-7534	336	6	the	the	DET
fuelectenerg-7534	336	7	output	output	NOUN
fuelectenerg-7534	336	8	ports	port	NOUN
fuelectenerg-7534	336	9	of	of	ADP
fuelectenerg-7534	336	10	a	a	DET
fuelectenerg-7534	336	11	coupler	coupler	NOUN
fuelectenerg-7534	336	12	by	by	ADP
fuelectenerg-7534	336	13	mems	mem	NOUN
fuelectenerg-7534	336	14	switches	switch	NOUN
fuelectenerg-7534	336	15	determines	determine	VERB
fuelectenerg-7534	336	16	a	a	DET
fuelectenerg-7534	336	17	45	45	NUM
fuelectenerg-7534	336	18	°	°	NOUN
fuelectenerg-7534	336	19	,	,	PUNCT
fuelectenerg-7534	336	20	180	180	NUM
fuelectenerg-7534	336	21	°	°	NUM
fuelectenerg-7534	336	22	or	or	CCONJ
fuelectenerg-7534	336	23	225	225	NUM
fuelectenerg-7534	336	24	°	°	NUM
fuelectenerg-7534	336	25	shift	shift	NOUN
fuelectenerg-7534	336	26	.	.	PUNCT
fuelectenerg-7534	337	1	implemented	implement	VERB
fuelectenerg-7534	337	2	on	on	ADP
fuelectenerg-7534	337	3	a	a	DET
fuelectenerg-7534	337	4	sapphire	sapphire	NOUN
fuelectenerg-7534	337	5	substrate	substrate	NOUN
fuelectenerg-7534	337	6	,	,	PUNCT
fuelectenerg-7534	337	7	the	the	DET
fuelectenerg-7534	337	8	whole	whole	ADJ
fuelectenerg-7534	337	9	circuit	circuit	NOUN
fuelectenerg-7534	337	10	covers	cover	VERB
fuelectenerg-7534	337	11	an	an	DET
fuelectenerg-7534	337	12	area	area	NOUN
fuelectenerg-7534	337	13	of	of	ADP
fuelectenerg-7534	337	14	7.9x4	7.9x4	NUM
fuelectenerg-7534	337	15	mm2	mm2	NOUN
fuelectenerg-7534	337	16	.	.	PUNCT
fuelectenerg-7534	338	1	this	this	DET
fuelectenerg-7534	338	2	device	device	NOUN
fuelectenerg-7534	338	3	,	,	PUNCT
fuelectenerg-7534	338	4	which	which	PRON
fuelectenerg-7534	338	5	has	have	AUX
fuelectenerg-7534	338	6	been	be	AUX
fuelectenerg-7534	338	7	conceived	conceive	VERB
fuelectenerg-7534	338	8	for	for	ADP
fuelectenerg-7534	338	9	the	the	DET
fuelectenerg-7534	338	10	ka	ka	PROPN
fuelectenerg-7534	338	11	band	band	PROPN
fuelectenerg-7534	338	12	,	,	PUNCT
fuelectenerg-7534	338	13	was	be	AUX
fuelectenerg-7534	338	14	characterized	characterize	VERB
fuelectenerg-7534	338	15	also	also	ADV
fuelectenerg-7534	338	16	in	in	ADP
fuelectenerg-7534	338	17	terms	term	NOUN
fuelectenerg-7534	338	18	of	of	ADP
fuelectenerg-7534	338	19	power	power	NOUN
fuelectenerg-7534	338	20	handling	handle	VERB
fuelectenerg-7534	338	21	capabilities	capability	NOUN
fuelectenerg-7534	338	22	,	,	PUNCT
fuelectenerg-7534	338	23	showing	show	VERB
fuelectenerg-7534	338	24	a	a	DET
fuelectenerg-7534	338	25	commendable	commendable	ADJ
fuelectenerg-7534	338	26	behavior	behavior	NOUN
fuelectenerg-7534	338	27	up	up	ADP
fuelectenerg-7534	338	28	to	to	PART
fuelectenerg-7534	338	29	32	32	NUM
fuelectenerg-7534	338	30	dbm	dbm	PROPN
fuelectenerg-7534	338	31	input	input	NOUN
fuelectenerg-7534	338	32	power	power	NOUN
fuelectenerg-7534	338	33	.	.	PUNCT
fuelectenerg-7534	339	1	among	among	ADP
fuelectenerg-7534	339	2	the	the	DET
fuelectenerg-7534	339	3	different	different	ADJ
fuelectenerg-7534	339	4	advances	advance	NOUN
fuelectenerg-7534	339	5	in	in	ADP
fuelectenerg-7534	339	6	the	the	DET
fuelectenerg-7534	339	7	field	field	NOUN
fuelectenerg-7534	339	8	of	of	ADP
fuelectenerg-7534	339	9	rf	rf	ADJ
fuelectenerg-7534	339	10	-	-	PUNCT
fuelectenerg-7534	339	11	mems	mem	NOUN
fuelectenerg-7534	339	12	phase	phase	NOUN
fuelectenerg-7534	339	13	shifters	shifter	NOUN
fuelectenerg-7534	339	14	listed	list	VERB
fuelectenerg-7534	339	15	in	in	ADP
fuelectenerg-7534	339	16	[	[	X
fuelectenerg-7534	339	17	87	87	NUM
fuelectenerg-7534	339	18	]	]	PUNCT
fuelectenerg-7534	339	19	,	,	PUNCT
fuelectenerg-7534	339	20	a	a	DET
fuelectenerg-7534	339	21	couple	couple	NOUN
fuelectenerg-7534	339	22	of	of	ADP
fuelectenerg-7534	339	23	them	they	PRON
fuelectenerg-7534	339	24	are	be	AUX
fuelectenerg-7534	339	25	interesting	interesting	ADJ
fuelectenerg-7534	339	26	from	from	ADP
fuelectenerg-7534	339	27	the	the	DET
fuelectenerg-7534	339	28	point	point	NOUN
fuelectenerg-7534	339	29	of	of	ADP
fuelectenerg-7534	339	30	view	view	NOUN
fuelectenerg-7534	339	31	of	of	ADP
fuelectenerg-7534	339	32	the	the	DET
fuelectenerg-7534	339	33	design	design	NOUN
fuelectenerg-7534	339	34	strategy	strategy	NOUN
fuelectenerg-7534	339	35	.	.	PUNCT
fuelectenerg-7534	340	1	in	in	ADP
fuelectenerg-7534	340	2	particular	particular	ADJ
fuelectenerg-7534	340	3	,	,	PUNCT
fuelectenerg-7534	340	4	for	for	ADP
fuelectenerg-7534	340	5	the	the	DET
fuelectenerg-7534	340	6	design	design	NOUN
fuelectenerg-7534	340	7	of	of	ADP
fuelectenerg-7534	340	8	devices	device	NOUN
fuelectenerg-7534	340	9	working	work	VERB
fuelectenerg-7534	340	10	in	in	ADP
fuelectenerg-7534	340	11	k	k	PROPN
fuelectenerg-7534	340	12	and	and	CCONJ
fuelectenerg-7534	340	13	ka	ka	PROPN
fuelectenerg-7534	340	14	band	band	PROPN
fuelectenerg-7534	340	15	,	,	PUNCT
fuelectenerg-7534	340	16	a	a	DET
fuelectenerg-7534	340	17	hybrid	hybrid	ADJ
fuelectenerg-7534	340	18	distributed	distribute	VERB
fuelectenerg-7534	340	19	-	-	PUNCT
fuelectenerg-7534	340	20	reflective	reflective	ADJ
fuelectenerg-7534	340	21	architecture	architecture	NOUN
fuelectenerg-7534	340	22	is	be	AUX
fuelectenerg-7534	340	23	adopted	adopt	VERB
fuelectenerg-7534	340	24	.	.	PUNCT
fuelectenerg-7534	341	1	when	when	SCONJ
fuelectenerg-7534	341	2	small	small	ADJ
fuelectenerg-7534	341	3	shift	shift	NOUN
fuelectenerg-7534	341	4	(	(	PUNCT
fuelectenerg-7534	341	5	22.5	22.5	NUM
fuelectenerg-7534	341	6	°	°	NUM
fuelectenerg-7534	341	7	or	or	CCONJ
fuelectenerg-7534	341	8	45	45	NUM
fuelectenerg-7534	341	9	°	°	NUM
fuelectenerg-7534	341	10	)	)	PUNCT
fuelectenerg-7534	341	11	is	be	AUX
fuelectenerg-7534	341	12	required	require	VERB
fuelectenerg-7534	341	13	,	,	PUNCT
fuelectenerg-7534	341	14	only	only	ADV
fuelectenerg-7534	341	15	the	the	DET
fuelectenerg-7534	341	16	input	input	NOUN
fuelectenerg-7534	341	17	microstrip	microstrip	NOUN
fuelectenerg-7534	341	18	lines	line	NOUN
fuelectenerg-7534	341	19	of	of	ADP
fuelectenerg-7534	341	20	the	the	DET
fuelectenerg-7534	341	21	coupler	coupler	NOUN
fuelectenerg-7534	341	22	are	be	AUX
fuelectenerg-7534	341	23	loaded	load	VERB
fuelectenerg-7534	341	24	with	with	ADP
fuelectenerg-7534	341	25	capacitive	capacitive	ADJ
fuelectenerg-7534	341	26	radial	radial	ADJ
fuelectenerg-7534	341	27	stubs	stub	NOUN
fuelectenerg-7534	341	28	by	by	ADP
fuelectenerg-7534	341	29	mems	mem	NOUN
fuelectenerg-7534	341	30	switches	switch	NOUN
fuelectenerg-7534	341	31	,	,	PUNCT
fuelectenerg-7534	341	32	without	without	ADP
fuelectenerg-7534	341	33	actuating	actuate	VERB
fuelectenerg-7534	341	34	any	any	DET
fuelectenerg-7534	341	35	load	load	NOUN
fuelectenerg-7534	341	36	on	on	ADP
fuelectenerg-7534	341	37	the	the	DET
fuelectenerg-7534	341	38	other	other	ADJ
fuelectenerg-7534	341	39	ports	port	NOUN
fuelectenerg-7534	341	40	of	of	ADP
fuelectenerg-7534	341	41	the	the	DET
fuelectenerg-7534	341	42	coupler	coupler	NOUN
fuelectenerg-7534	341	43	.	.	PUNCT
fuelectenerg-7534	342	1	differently	differently	ADV
fuelectenerg-7534	342	2	,	,	PUNCT
fuelectenerg-7534	342	3	when	when	SCONJ
fuelectenerg-7534	342	4	a	a	DET
fuelectenerg-7534	342	5	higher	high	ADJ
fuelectenerg-7534	342	6	shift	shift	NOUN
fuelectenerg-7534	342	7	is	be	AUX
fuelectenerg-7534	342	8	required	require	VERB
fuelectenerg-7534	342	9	(	(	PUNCT
fuelectenerg-7534	342	10	from	from	ADP
fuelectenerg-7534	342	11	90	90	NUM
fuelectenerg-7534	342	12	°	°	NOUN
fuelectenerg-7534	342	13	to	to	ADP
fuelectenerg-7534	342	14	270	270	NUM
fuelectenerg-7534	342	15	°	°	NUM
fuelectenerg-7534	342	16	)	)	PUNCT
fuelectenerg-7534	342	17	,	,	PUNCT
fuelectenerg-7534	342	18	capacitive	capacitive	ADJ
fuelectenerg-7534	342	19	loads	load	NOUN
fuelectenerg-7534	342	20	are	be	AUX
fuelectenerg-7534	342	21	activated	activate	VERB
fuelectenerg-7534	342	22	on	on	ADP
fuelectenerg-7534	342	23	the	the	DET
fuelectenerg-7534	342	24	output	output	NOUN
fuelectenerg-7534	342	25	lines	line	NOUN
fuelectenerg-7534	342	26	of	of	ADP
fuelectenerg-7534	342	27	the	the	DET
fuelectenerg-7534	342	28	coupler	coupler	NOUN
fuelectenerg-7534	342	29	by	by	ADP
fuelectenerg-7534	342	30	switches	switch	NOUN
fuelectenerg-7534	342	31	.	.	PUNCT
fuelectenerg-7534	343	1	two	two	NUM
fuelectenerg-7534	343	2	packaged	package	VERB
fuelectenerg-7534	343	3	realizations	realization	NOUN
fuelectenerg-7534	343	4	of	of	ADP
fuelectenerg-7534	343	5	such	such	ADJ
fuelectenerg-7534	343	6	architecture	architecture	NOUN
fuelectenerg-7534	343	7	have	have	AUX
fuelectenerg-7534	343	8	been	be	AUX
fuelectenerg-7534	343	9	measured	measure	VERB
fuelectenerg-7534	343	10	in	in	ADP
fuelectenerg-7534	343	11	a	a	DET
fuelectenerg-7534	343	12	comprehensive	comprehensive	ADJ
fuelectenerg-7534	343	13	overview	overview	NOUN
fuelectenerg-7534	343	14	of	of	ADP
fuelectenerg-7534	343	15	recent	recent	ADJ
fuelectenerg-7534	343	16	developments	development	NOUN
fuelectenerg-7534	343	17	in	in	ADP
fuelectenerg-7534	343	18	rf	rf	ADJ
fuelectenerg-7534	343	19	-	-	PUNCT
fuelectenerg-7534	343	20	mems	mems	ADJ
fuelectenerg-7534	343	21	technology	technology	NOUN
fuelectenerg-7534	343	22	351	351	NUM
fuelectenerg-7534	343	23	their	their	PRON
fuelectenerg-7534	343	24	16	16	NUM
fuelectenerg-7534	343	25	phase	phase	NOUN
fuelectenerg-7534	343	26	states	state	NOUN
fuelectenerg-7534	343	27	,	,	PUNCT
fuelectenerg-7534	343	28	one	one	NUM
fuelectenerg-7534	343	29	working	work	VERB
fuelectenerg-7534	343	30	at	at	ADP
fuelectenerg-7534	343	31	15	15	NUM
fuelectenerg-7534	343	32	ghz	ghz	NOUN
fuelectenerg-7534	343	33	and	and	CCONJ
fuelectenerg-7534	343	34	shown	show	VERB
fuelectenerg-7534	343	35	in	in	ADP
fuelectenerg-7534	343	36	figure	figure	NOUN
fuelectenerg-7534	343	37	7a	7a	NUM
fuelectenerg-7534	343	38	,	,	PUNCT
fuelectenerg-7534	343	39	while	while	SCONJ
fuelectenerg-7534	343	40	the	the	DET
fuelectenerg-7534	343	41	other	other	ADJ
fuelectenerg-7534	343	42	at	at	ADP
fuelectenerg-7534	343	43	21	21	NUM
fuelectenerg-7534	343	44	ghz	ghz	NOUN
fuelectenerg-7534	343	45	.	.	PUNCT
fuelectenerg-7534	344	1	the	the	DET
fuelectenerg-7534	344	2	packaged	package	VERB
fuelectenerg-7534	344	3	devices	device	NOUN
fuelectenerg-7534	344	4	proved	prove	VERB
fuelectenerg-7534	344	5	to	to	PART
fuelectenerg-7534	344	6	be	be	AUX
fuelectenerg-7534	344	7	able	able	ADJ
fuelectenerg-7534	344	8	to	to	PART
fuelectenerg-7534	344	9	sustain	sustain	VERB
fuelectenerg-7534	344	10	over	over	ADP
fuelectenerg-7534	344	11	250	250	NUM
fuelectenerg-7534	344	12	billion	billion	NUM
fuelectenerg-7534	344	13	switch	switch	NOUN
fuelectenerg-7534	344	14	actuations	actuation	NOUN
fuelectenerg-7534	344	15	.	.	PUNCT
fuelectenerg-7534	345	1	a	a	DET
fuelectenerg-7534	345	2	robust	robust	ADJ
fuelectenerg-7534	345	3	implementation	implementation	NOUN
fuelectenerg-7534	345	4	of	of	ADP
fuelectenerg-7534	345	5	a	a	DET
fuelectenerg-7534	345	6	phase	phase	NOUN
fuelectenerg-7534	345	7	shifter	shifter	NOUN
fuelectenerg-7534	345	8	mounted	mount	VERB
fuelectenerg-7534	345	9	on	on	ADP
fuelectenerg-7534	345	10	a	a	DET
fuelectenerg-7534	345	11	base	base	NOUN
fuelectenerg-7534	345	12	station	station	NOUN
fuelectenerg-7534	345	13	for	for	ADP
fuelectenerg-7534	345	14	electronically	electronically	ADV
fuelectenerg-7534	345	15	scanned	scan	VERB
fuelectenerg-7534	345	16	antennas	antenna	NOUN
fuelectenerg-7534	345	17	,	,	PUNCT
fuelectenerg-7534	345	18	is	be	AUX
fuelectenerg-7534	345	19	reported	report	VERB
fuelectenerg-7534	345	20	in	in	ADP
fuelectenerg-7534	345	21	[	[	X
fuelectenerg-7534	345	22	88	88	NUM
fuelectenerg-7534	345	23	]	]	PUNCT
fuelectenerg-7534	345	24	.	.	PUNCT
fuelectenerg-7534	346	1	it	it	PRON
fuelectenerg-7534	346	2	is	be	AUX
fuelectenerg-7534	346	3	composed	compose	VERB
fuelectenerg-7534	346	4	by	by	ADP
fuelectenerg-7534	346	5	two	two	NUM
fuelectenerg-7534	346	6	stages	stage	NOUN
fuelectenerg-7534	346	7	:	:	PUNCT
fuelectenerg-7534	346	8	one	one	NUM
fuelectenerg-7534	346	9	introducing	introduce	VERB
fuelectenerg-7534	346	10	0	0	NUM
fuelectenerg-7534	346	11	°	°	NUM
fuelectenerg-7534	346	12	,	,	PUNCT
fuelectenerg-7534	346	13	11.25	11.25	NUM
fuelectenerg-7534	346	14	°	°	NUM
fuelectenerg-7534	346	15	,	,	PUNCT
fuelectenerg-7534	346	16	22.5	22.5	NUM
fuelectenerg-7534	346	17	°	°	NOUN
fuelectenerg-7534	346	18	or	or	CCONJ
fuelectenerg-7534	346	19	33.75	33.75	NUM
fuelectenerg-7534	346	20	°	°	NOUN
fuelectenerg-7534	346	21	,	,	PUNCT
fuelectenerg-7534	346	22	while	while	SCONJ
fuelectenerg-7534	346	23	the	the	DET
fuelectenerg-7534	346	24	other	other	ADJ
fuelectenerg-7534	346	25	introducing	introduce	VERB
fuelectenerg-7534	346	26	0	0	NUM
fuelectenerg-7534	346	27	°	°	NOUN
fuelectenerg-7534	346	28	,	,	PUNCT
fuelectenerg-7534	346	29	45	45	NUM
fuelectenerg-7534	346	30	°	°	NUM
fuelectenerg-7534	346	31	or	or	CCONJ
fuelectenerg-7534	346	32	90	90	NUM
fuelectenerg-7534	346	33	°	°	NUM
fuelectenerg-7534	346	34	shift	shift	NOUN
fuelectenerg-7534	346	35	.	.	PUNCT
fuelectenerg-7534	347	1	each	each	DET
fuelectenerg-7534	347	2	stage	stage	NOUN
fuelectenerg-7534	347	3	comprises	comprise	VERB
fuelectenerg-7534	347	4	a	a	DET
fuelectenerg-7534	347	5	quadrature	quadrature	NOUN
fuelectenerg-7534	347	6	coupler	coupler	NOUN
fuelectenerg-7534	347	7	and	and	CCONJ
fuelectenerg-7534	347	8	lc	lc	PROPN
fuelectenerg-7534	347	9	loads	load	NOUN
fuelectenerg-7534	347	10	,	,	PUNCT
fuelectenerg-7534	347	11	both	both	PRON
fuelectenerg-7534	347	12	realized	realize	VERB
fuelectenerg-7534	347	13	by	by	ADP
fuelectenerg-7534	347	14	microstrip	microstrip	NOUN
fuelectenerg-7534	347	15	.	.	PUNCT
fuelectenerg-7534	348	1	loads	load	NOUN
fuelectenerg-7534	348	2	are	be	AUX
fuelectenerg-7534	348	3	selected	select	VERB
fuelectenerg-7534	348	4	by	by	ADP
fuelectenerg-7534	348	5	commercial	commercial	ADJ
fuelectenerg-7534	348	6	omron	omron	PROPN
fuelectenerg-7534	348	7	spdt	spdt	PROPN
fuelectenerg-7534	348	8	mems	mems	PROPN
fuelectenerg-7534	348	9	switches	switch	NOUN
fuelectenerg-7534	348	10	.	.	PUNCT
fuelectenerg-7534	349	1	the	the	DET
fuelectenerg-7534	349	2	proposed	propose	VERB
fuelectenerg-7534	349	3	device	device	NOUN
fuelectenerg-7534	349	4	is	be	AUX
fuelectenerg-7534	349	5	realized	realize	VERB
fuelectenerg-7534	349	6	on	on	ADP
fuelectenerg-7534	349	7	common	common	ADJ
fuelectenerg-7534	349	8	ro4003	ro4003	NOUN
fuelectenerg-7534	349	9	substrate	substrate	NOUN
fuelectenerg-7534	349	10	.	.	PUNCT
fuelectenerg-7534	350	1	the	the	DET
fuelectenerg-7534	350	2	employed	employ	VERB
fuelectenerg-7534	350	3	switches	switch	NOUN
fuelectenerg-7534	350	4	have	have	AUX
fuelectenerg-7534	350	5	been	be	AUX
fuelectenerg-7534	350	6	extensively	extensively	ADV
fuelectenerg-7534	350	7	characterized	characterize	VERB
fuelectenerg-7534	350	8	in	in	ADP
fuelectenerg-7534	350	9	terms	term	NOUN
fuelectenerg-7534	350	10	of	of	ADP
fuelectenerg-7534	350	11	reliability	reliability	NOUN
fuelectenerg-7534	350	12	:	:	PUNCT
fuelectenerg-7534	350	13	at	at	ADP
fuelectenerg-7534	350	14	2	2	NUM
fuelectenerg-7534	350	15	ghz	ghz	NOUN
fuelectenerg-7534	350	16	rf	rf	NOUN
fuelectenerg-7534	350	17	power	power	NOUN
fuelectenerg-7534	350	18	and	and	CCONJ
fuelectenerg-7534	350	19	hot	hot	ADJ
fuelectenerg-7534	350	20	switching	switching	NOUN
fuelectenerg-7534	350	21	conditions	condition	NOUN
fuelectenerg-7534	350	22	,	,	PUNCT
fuelectenerg-7534	350	23	switches	switch	NOUN
fuelectenerg-7534	350	24	operated	operate	VERB
fuelectenerg-7534	350	25	beyond	beyond	ADP
fuelectenerg-7534	350	26	100	100	NUM
fuelectenerg-7534	350	27	m	m	NOUN
fuelectenerg-7534	350	28	cycles	cycle	NOUN
fuelectenerg-7534	350	29	(	(	PUNCT
fuelectenerg-7534	350	30	in	in	ADP
fuelectenerg-7534	350	31	(	(	PUNCT
fuelectenerg-7534	350	32	0.1	0.1	NUM
fuelectenerg-7534	350	33	-	-	SYM
fuelectenerg-7534	350	34	0.3	0.3	NUM
fuelectenerg-7534	350	35	)	)	PUNCT
fuelectenerg-7534	350	36	mw	mw	ADJ
fuelectenerg-7534	350	37	range	range	NOUN
fuelectenerg-7534	350	38	)	)	PUNCT
fuelectenerg-7534	350	39	and	and	CCONJ
fuelectenerg-7534	350	40	slightly	slightly	ADV
fuelectenerg-7534	350	41	more	more	ADJ
fuelectenerg-7534	350	42	than	than	ADP
fuelectenerg-7534	350	43	5	5	NUM
fuelectenerg-7534	350	44	m	m	NOUN
fuelectenerg-7534	350	45	cycles	cycle	NOUN
fuelectenerg-7534	350	46	(	(	PUNCT
fuelectenerg-7534	350	47	in	in	ADP
fuelectenerg-7534	350	48	the	the	DET
fuelectenerg-7534	350	49	(	(	PUNCT
fuelectenerg-7534	350	50	0.5	0.5	NUM
fuelectenerg-7534	350	51	-	-	SYM
fuelectenerg-7534	350	52	1	1	NUM
fuelectenerg-7534	350	53	)	)	PUNCT
fuelectenerg-7534	350	54	w	w	NOUN
fuelectenerg-7534	350	55	range	range	NOUN
fuelectenerg-7534	350	56	)	)	PUNCT
fuelectenerg-7534	350	57	.	.	PUNCT
fuelectenerg-7534	351	1	(	(	PUNCT
fuelectenerg-7534	351	2	a	a	X
fuelectenerg-7534	351	3	)	)	PUNCT
fuelectenerg-7534	351	4	(	(	PUNCT
fuelectenerg-7534	351	5	b	b	X
fuelectenerg-7534	351	6	)	)	PUNCT
fuelectenerg-7534	351	7	fig	fig	NOUN
fuelectenerg-7534	351	8	.	.	PUNCT
fuelectenerg-7534	352	1	7	7	NUM
fuelectenerg-7534	352	2	(	(	PUNCT
fuelectenerg-7534	352	3	a	a	NOUN
fuelectenerg-7534	352	4	)	)	PUNCT
fuelectenerg-7534	352	5	realization	realization	NOUN
fuelectenerg-7534	352	6	of	of	ADP
fuelectenerg-7534	352	7	reflection	reflection	NOUN
fuelectenerg-7534	352	8	type	type	NOUN
fuelectenerg-7534	352	9	phase	phase	NOUN
fuelectenerg-7534	352	10	shifter	shifter	NOUN
fuelectenerg-7534	352	11	working	work	VERB
fuelectenerg-7534	352	12	at	at	ADP
fuelectenerg-7534	352	13	15	15	NUM
fuelectenerg-7534	352	14	ghz	ghz	NOUN
fuelectenerg-7534	352	15	,	,	PUNCT
fuelectenerg-7534	352	16	described	describe	VERB
fuelectenerg-7534	352	17	in	in	ADP
fuelectenerg-7534	352	18	[	[	X
fuelectenerg-7534	352	19	87	87	NUM
fuelectenerg-7534	352	20	]	]	PUNCT
fuelectenerg-7534	352	21	,	,	PUNCT
fuelectenerg-7534	352	22	(	(	PUNCT
fuelectenerg-7534	352	23	b	b	X
fuelectenerg-7534	352	24	)	)	PUNCT
fuelectenerg-7534	352	25	top	top	ADJ
fuelectenerg-7534	352	26	view	view	NOUN
fuelectenerg-7534	352	27	of	of	ADP
fuelectenerg-7534	352	28	the	the	DET
fuelectenerg-7534	352	29	architecture	architecture	NOUN
fuelectenerg-7534	352	30	proposed	propose	VERB
fuelectenerg-7534	352	31	by	by	ADP
fuelectenerg-7534	352	32	[	[	X
fuelectenerg-7534	352	33	89	89	NUM
fuelectenerg-7534	352	34	]	]	PUNCT
fuelectenerg-7534	352	35	.	.	PUNCT
fuelectenerg-7534	353	1	a	a	DET
fuelectenerg-7534	353	2	significant	significant	ADJ
fuelectenerg-7534	353	3	suggestion	suggestion	NOUN
fuelectenerg-7534	353	4	in	in	ADP
fuelectenerg-7534	353	5	terms	term	NOUN
fuelectenerg-7534	353	6	of	of	ADP
fuelectenerg-7534	353	7	reconfigurability	reconfigurability	NOUN
fuelectenerg-7534	353	8	and	and	CCONJ
fuelectenerg-7534	353	9	shifting	shift	VERB
fuelectenerg-7534	353	10	range	range	NOUN
fuelectenerg-7534	353	11	comes	come	VERB
fuelectenerg-7534	353	12	from	from	ADP
fuelectenerg-7534	353	13	[	[	X
fuelectenerg-7534	353	14	90	90	NUM
fuelectenerg-7534	353	15	]	]	PUNCT
fuelectenerg-7534	353	16	.	.	PUNCT
fuelectenerg-7534	354	1	after	after	ADP
fuelectenerg-7534	354	2	a	a	DET
fuelectenerg-7534	354	3	detailed	detailed	ADJ
fuelectenerg-7534	354	4	characterization	characterization	NOUN
fuelectenerg-7534	354	5	of	of	ADP
fuelectenerg-7534	354	6	a	a	DET
fuelectenerg-7534	354	7	proposed	propose	VERB
fuelectenerg-7534	354	8	reconfigurable	reconfigurable	ADJ
fuelectenerg-7534	354	9	quadrature	quadrature	NOUN
fuelectenerg-7534	354	10	hybrid	hybrid	NOUN
fuelectenerg-7534	354	11	coupler	coupler	NOUN
fuelectenerg-7534	354	12	based	base	VERB
fuelectenerg-7534	354	13	on	on	ADP
fuelectenerg-7534	354	14	mems	mems	ADJ
fuelectenerg-7534	354	15	varactors	varactor	NOUN
fuelectenerg-7534	354	16	,	,	PUNCT
fuelectenerg-7534	354	17	this	this	DET
fuelectenerg-7534	354	18	one	one	NOUN
fuelectenerg-7534	354	19	is	be	AUX
fuelectenerg-7534	354	20	adopted	adopt	VERB
fuelectenerg-7534	354	21	in	in	ADP
fuelectenerg-7534	354	22	the	the	DET
fuelectenerg-7534	354	23	implementation	implementation	NOUN
fuelectenerg-7534	354	24	of	of	ADP
fuelectenerg-7534	354	25	a	a	DET
fuelectenerg-7534	354	26	360	360	NUM
fuelectenerg-7534	354	27	°	°	ADJ
fuelectenerg-7534	354	28	phase	phase	NOUN
fuelectenerg-7534	354	29	shifter	shifter	NOUN
fuelectenerg-7534	354	30	.	.	PUNCT
fuelectenerg-7534	355	1	in	in	ADP
fuelectenerg-7534	355	2	this	this	DET
fuelectenerg-7534	355	3	case	case	NOUN
fuelectenerg-7534	355	4	,	,	PUNCT
fuelectenerg-7534	355	5	each	each	DET
fuelectenerg-7534	355	6	output	output	NOUN
fuelectenerg-7534	355	7	branch	branch	NOUN
fuelectenerg-7534	355	8	of	of	ADP
fuelectenerg-7534	355	9	the	the	DET
fuelectenerg-7534	355	10	reconfigurable	reconfigurable	ADJ
fuelectenerg-7534	355	11	coupler	coupler	NOUN
fuelectenerg-7534	355	12	is	be	AUX
fuelectenerg-7534	355	13	connected	connect	VERB
fuelectenerg-7534	355	14	to	to	ADP
fuelectenerg-7534	355	15	a	a	DET
fuelectenerg-7534	355	16	dual	dual	ADJ
fuelectenerg-7534	355	17	-	-	PUNCT
fuelectenerg-7534	355	18	resonant	resonant	NOUN
fuelectenerg-7534	355	19	lc	lc	NOUN
fuelectenerg-7534	355	20	load	load	NOUN
fuelectenerg-7534	355	21	,	,	PUNCT
fuelectenerg-7534	355	22	realized	realize	VERB
fuelectenerg-7534	355	23	by	by	ADP
fuelectenerg-7534	355	24	two	two	NUM
fuelectenerg-7534	355	25	parallel	parallel	ADJ
fuelectenerg-7534	355	26	branches	branch	NOUN
fuelectenerg-7534	355	27	connected	connect	VERB
fuelectenerg-7534	355	28	to	to	ADP
fuelectenerg-7534	355	29	ground	ground	VERB
fuelectenerg-7534	355	30	,	,	PUNCT
fuelectenerg-7534	355	31	each	each	DET
fuelectenerg-7534	355	32	one	one	NOUN
fuelectenerg-7534	355	33	including	include	VERB
fuelectenerg-7534	355	34	an	an	DET
fuelectenerg-7534	355	35	inductor	inductor	NOUN
fuelectenerg-7534	355	36	and	and	CCONJ
fuelectenerg-7534	355	37	a	a	DET
fuelectenerg-7534	355	38	5	5	NUM
fuelectenerg-7534	355	39	-	-	PUNCT
fuelectenerg-7534	355	40	bit	bit	NOUN
fuelectenerg-7534	355	41	varactor	varactor	NOUN
fuelectenerg-7534	355	42	,	,	PUNCT
fuelectenerg-7534	355	43	controllable	controllable	ADJ
fuelectenerg-7534	355	44	by	by	ADP
fuelectenerg-7534	355	45	35	35	NUM
fuelectenerg-7534	355	46	v	v	NOUN
fuelectenerg-7534	355	47	actuation	actuation	NOUN
fuelectenerg-7534	355	48	.	.	PUNCT
fuelectenerg-7534	356	1	this	this	DET
fuelectenerg-7534	356	2	kind	kind	NOUN
fuelectenerg-7534	356	3	of	of	ADP
fuelectenerg-7534	356	4	load	load	NOUN
fuelectenerg-7534	356	5	allows	allow	VERB
fuelectenerg-7534	356	6	a	a	DET
fuelectenerg-7534	356	7	360	360	NUM
fuelectenerg-7534	356	8	°	°	ADJ
fuelectenerg-7534	356	9	phase	phase	NOUN
fuelectenerg-7534	356	10	shift	shift	NOUN
fuelectenerg-7534	356	11	,	,	PUNCT
fuelectenerg-7534	356	12	without	without	ADP
fuelectenerg-7534	356	13	the	the	DET
fuelectenerg-7534	356	14	need	need	NOUN
fuelectenerg-7534	356	15	of	of	ADP
fuelectenerg-7534	356	16	including	include	VERB
fuelectenerg-7534	356	17	another	another	DET
fuelectenerg-7534	356	18	stage	stage	NOUN
fuelectenerg-7534	356	19	.	.	PUNCT
fuelectenerg-7534	357	1	by	by	ADP
fuelectenerg-7534	357	2	acting	act	VERB
fuelectenerg-7534	357	3	on	on	ADP
fuelectenerg-7534	357	4	the	the	DET
fuelectenerg-7534	357	5	10	10	NUM
fuelectenerg-7534	357	6	bits	bit	NOUN
fuelectenerg-7534	357	7	is	be	AUX
fuelectenerg-7534	357	8	then	then	ADV
fuelectenerg-7534	357	9	possible	possible	ADJ
fuelectenerg-7534	357	10	to	to	PART
fuelectenerg-7534	357	11	achieve	achieve	VERB
fuelectenerg-7534	357	12	1024	1024	NUM
fuelectenerg-7534	357	13	phase	phase	NOUN
fuelectenerg-7534	357	14	states	state	NOUN
fuelectenerg-7534	357	15	,	,	PUNCT
fuelectenerg-7534	357	16	although	although	SCONJ
fuelectenerg-7534	357	17	some	some	PRON
fuelectenerg-7534	357	18	of	of	ADP
fuelectenerg-7534	357	19	them	they	PRON
fuelectenerg-7534	357	20	will	will	AUX
fuelectenerg-7534	357	21	be	be	AUX
fuelectenerg-7534	357	22	quite	quite	ADV
fuelectenerg-7534	357	23	similar	similar	ADJ
fuelectenerg-7534	357	24	for	for	ADP
fuelectenerg-7534	357	25	what	what	PRON
fuelectenerg-7534	357	26	concerns	concern	VERB
fuelectenerg-7534	357	27	the	the	DET
fuelectenerg-7534	357	28	resulting	result	VERB
fuelectenerg-7534	357	29	shift	shift	NOUN
fuelectenerg-7534	357	30	.	.	PUNCT
fuelectenerg-7534	358	1	a	a	DET
fuelectenerg-7534	358	2	device	device	NOUN
fuelectenerg-7534	358	3	operating	operate	VERB
fuelectenerg-7534	358	4	at	at	ADP
fuelectenerg-7534	358	5	k	k	PROPN
fuelectenerg-7534	358	6	band	band	PROPN
fuelectenerg-7534	358	7	,	,	PUNCT
fuelectenerg-7534	358	8	with	with	ADP
fuelectenerg-7534	358	9	more	more	ADV
fuelectenerg-7534	358	10	classic	classic	ADJ
fuelectenerg-7534	358	11	design	design	NOUN
fuelectenerg-7534	358	12	,	,	PUNCT
fuelectenerg-7534	358	13	is	be	AUX
fuelectenerg-7534	358	14	proposed	propose	VERB
fuelectenerg-7534	358	15	in	in	ADP
fuelectenerg-7534	358	16	[	[	X
fuelectenerg-7534	358	17	91	91	NUM
fuelectenerg-7534	358	18	]	]	PUNCT
fuelectenerg-7534	358	19	.	.	PUNCT
fuelectenerg-7534	359	1	a	a	DET
fuelectenerg-7534	359	2	lange	lange	NOUN
fuelectenerg-7534	359	3	coupler	coupler	NOUN
fuelectenerg-7534	359	4	and	and	CCONJ
fuelectenerg-7534	359	5	two	two	NUM
fuelectenerg-7534	359	6	reflective	reflective	ADJ
fuelectenerg-7534	359	7	paths	path	NOUN
fuelectenerg-7534	359	8	,	,	PUNCT
fuelectenerg-7534	359	9	each	each	DET
fuelectenerg-7534	359	10	one	one	NOUN
fuelectenerg-7534	359	11	provided	provide	VERB
fuelectenerg-7534	359	12	with	with	ADP
fuelectenerg-7534	359	13	three	three	NUM
fuelectenerg-7534	359	14	switches	switch	NOUN
fuelectenerg-7534	359	15	along	along	ADP
fuelectenerg-7534	359	16	the	the	DET
fuelectenerg-7534	359	17	lines	line	NOUN
fuelectenerg-7534	359	18	,	,	PUNCT
fuelectenerg-7534	359	19	are	be	AUX
fuelectenerg-7534	359	20	enclosed	enclose	VERB
fuelectenerg-7534	359	21	in	in	ADP
fuelectenerg-7534	359	22	the	the	DET
fuelectenerg-7534	359	23	footprint	footprint	NOUN
fuelectenerg-7534	359	24	of	of	ADP
fuelectenerg-7534	359	25	2.45x1.77	2.45x1.77	NUM
fuelectenerg-7534	359	26	mm2	mm2	NOUN
fuelectenerg-7534	359	27	.	.	PUNCT
fuelectenerg-7534	360	1	the	the	DET
fuelectenerg-7534	360	2	length	length	NOUN
fuelectenerg-7534	360	3	of	of	ADP
fuelectenerg-7534	360	4	short	short	ADJ
fuelectenerg-7534	360	5	-	-	PUNCT
fuelectenerg-7534	360	6	ended	end	VERB
fuelectenerg-7534	360	7	lines	line	NOUN
fuelectenerg-7534	360	8	can	can	AUX
fuelectenerg-7534	360	9	be	be	AUX
fuelectenerg-7534	360	10	decreased	decrease	VERB
fuelectenerg-7534	360	11	by	by	ADP
fuelectenerg-7534	360	12	actuating	actuate	VERB
fuelectenerg-7534	360	13	one	one	NUM
fuelectenerg-7534	360	14	of	of	ADP
fuelectenerg-7534	360	15	the	the	DET
fuelectenerg-7534	360	16	shunt	shunt	NOUN
fuelectenerg-7534	360	17	switches	switch	NOUN
fuelectenerg-7534	360	18	.	.	PUNCT
fuelectenerg-7534	361	1	while	while	SCONJ
fuelectenerg-7534	361	2	the	the	DET
fuelectenerg-7534	361	3	total	total	ADJ
fuelectenerg-7534	361	4	length	length	NOUN
fuelectenerg-7534	361	5	of	of	ADP
fuelectenerg-7534	361	6	the	the	DET
fuelectenerg-7534	361	7	load	load	NOUN
fuelectenerg-7534	361	8	line	line	NOUN
fuelectenerg-7534	361	9	corresponds	correspond	VERB
fuelectenerg-7534	361	10	to	to	ADP
fuelectenerg-7534	361	11	a	a	DET
fuelectenerg-7534	361	12	135	135	NUM
fuelectenerg-7534	361	13	°	°	NUM
fuelectenerg-7534	361	14	shift	shift	NOUN
fuelectenerg-7534	361	15	,	,	PUNCT
fuelectenerg-7534	361	16	actuation	actuation	NOUN
fuelectenerg-7534	361	17	may	may	AUX
fuelectenerg-7534	361	18	introduce	introduce	VERB
fuelectenerg-7534	361	19	90	90	NUM
fuelectenerg-7534	361	20	°	°	NOUN
fuelectenerg-7534	361	21	,	,	PUNCT
fuelectenerg-7534	361	22	45	45	NUM
fuelectenerg-7534	361	23	°	°	NUM
fuelectenerg-7534	361	24	or	or	CCONJ
fuelectenerg-7534	361	25	0	0	NUM
fuelectenerg-7534	361	26	°	°	NUM
fuelectenerg-7534	361	27	.	.	PUNCT
fuelectenerg-7534	362	1	the	the	DET
fuelectenerg-7534	362	2	same	same	ADJ
fuelectenerg-7534	362	3	concept	concept	NOUN
fuelectenerg-7534	362	4	is	be	AUX
fuelectenerg-7534	362	5	exploited	exploit	VERB
fuelectenerg-7534	362	6	in	in	ADP
fuelectenerg-7534	362	7	[	[	X
fuelectenerg-7534	362	8	89	89	NUM
fuelectenerg-7534	362	9	]	]	PUNCT
fuelectenerg-7534	362	10	,	,	PUNCT
fuelectenerg-7534	362	11	where	where	SCONJ
fuelectenerg-7534	362	12	a	a	DET
fuelectenerg-7534	362	13	coupler	coupler	NOUN
fuelectenerg-7534	362	14	made	make	VERB
fuelectenerg-7534	362	15	by	by	ADP
fuelectenerg-7534	362	16	folded	fold	VERB
fuelectenerg-7534	362	17	broad	broad	ADJ
fuelectenerg-7534	362	18	-	-	PUNCT
fuelectenerg-7534	362	19	side	side	NOUN
fuelectenerg-7534	362	20	coupled	couple	VERB
fuelectenerg-7534	362	21	lines	line	NOUN
fuelectenerg-7534	362	22	is	be	AUX
fuelectenerg-7534	362	23	presented	present	VERB
fuelectenerg-7534	362	24	,	,	PUNCT
fuelectenerg-7534	362	25	after	after	ADP
fuelectenerg-7534	362	26	a	a	DET
fuelectenerg-7534	362	27	detailed	detailed	ADJ
fuelectenerg-7534	362	28	theoretical	theoretical	ADJ
fuelectenerg-7534	362	29	analysis	analysis	NOUN
fuelectenerg-7534	362	30	of	of	ADP
fuelectenerg-7534	362	31	the	the	DET
fuelectenerg-7534	362	32	qualities	quality	NOUN
fuelectenerg-7534	362	33	to	to	PART
fuelectenerg-7534	362	34	be	be	AUX
fuelectenerg-7534	362	35	pursued	pursue	VERB
fuelectenerg-7534	362	36	in	in	ADP
fuelectenerg-7534	362	37	the	the	DET
fuelectenerg-7534	362	38	design	design	NOUN
fuelectenerg-7534	362	39	of	of	ADP
fuelectenerg-7534	362	40	both	both	CCONJ
fuelectenerg-7534	362	41	the	the	DET
fuelectenerg-7534	362	42	coupler	coupler	NOUN
fuelectenerg-7534	362	43	and	and	CCONJ
fuelectenerg-7534	362	44	the	the	DET
fuelectenerg-7534	362	45	reflective	reflective	ADJ
fuelectenerg-7534	362	46	loads	load	NOUN
fuelectenerg-7534	362	47	.	.	PUNCT
fuelectenerg-7534	363	1	its	its	PRON
fuelectenerg-7534	363	2	ultrawideband	ultrawideband	NOUN
fuelectenerg-7534	363	3	performances	performance	NOUN
fuelectenerg-7534	363	4	comprehend	comprehend	VERB
fuelectenerg-7534	363	5	:	:	PUNCT
fuelectenerg-7534	363	6	reflection	reflection	NOUN
fuelectenerg-7534	363	7	coefficients	coefficient	NOUN
fuelectenerg-7534	363	8	of	of	ADP
fuelectenerg-7534	363	9	all	all	DET
fuelectenerg-7534	363	10	ports	port	NOUN
fuelectenerg-7534	363	11	smaller	small	ADJ
fuelectenerg-7534	363	12	than	than	ADP
fuelectenerg-7534	363	13	-25	-25	PUNCT
fuelectenerg-7534	363	14	db	db	PART
fuelectenerg-7534	363	15	and	and	CCONJ
fuelectenerg-7534	363	16	isolation	isolation	NOUN
fuelectenerg-7534	363	17	greater	great	ADJ
fuelectenerg-7534	363	18	than	than	ADP
fuelectenerg-7534	363	19	-28	-28	PROPN
fuelectenerg-7534	363	20	db	db	PROPN
fuelectenerg-7534	363	21	,	,	PUNCT
fuelectenerg-7534	363	22	over	over	ADP
fuelectenerg-7534	363	23	the	the	DET
fuelectenerg-7534	363	24	whole	whole	ADJ
fuelectenerg-7534	363	25	(	(	PUNCT
fuelectenerg-7534	363	26	70	70	NUM
fuelectenerg-7534	363	27	-	-	SYM
fuelectenerg-7534	363	28	86	86	NUM
fuelectenerg-7534	363	29	)	)	PUNCT
fuelectenerg-7534	363	30	ghz	ghz	NOUN
fuelectenerg-7534	363	31	interval	interval	NOUN
fuelectenerg-7534	363	32	.	.	PUNCT
fuelectenerg-7534	364	1	eight	eight	NUM
fuelectenerg-7534	364	2	switches	switch	NOUN
fuelectenerg-7534	364	3	are	be	AUX
fuelectenerg-7534	364	4	comprised	comprise	VERB
fuelectenerg-7534	364	5	in	in	ADP
fuelectenerg-7534	364	6	such	such	ADJ
fuelectenerg-7534	364	7	3	3	NUM
fuelectenerg-7534	364	8	-	-	PUNCT
fuelectenerg-7534	364	9	bit	bit	NOUN
fuelectenerg-7534	364	10	device	device	NOUN
fuelectenerg-7534	364	11	depicted	depict	VERB
fuelectenerg-7534	364	12	in	in	ADP
fuelectenerg-7534	364	13	figure	figure	NOUN
fuelectenerg-7534	364	14	7b	7b	NOUN
fuelectenerg-7534	364	15	,	,	PUNCT
fuelectenerg-7534	364	16	for	for	ADP
fuelectenerg-7534	364	17	a	a	DET
fuelectenerg-7534	364	18	total	total	ADJ
fuelectenerg-7534	364	19	footprint	footprint	NOUN
fuelectenerg-7534	364	20	of	of	ADP
fuelectenerg-7534	364	21	2.68x0.70	2.68x0.70	NUM
fuelectenerg-7534	364	22	mm2	mm2	NOUN
fuelectenerg-7534	364	23	,	,	PUNCT
fuelectenerg-7534	364	24	considering	consider	VERB
fuelectenerg-7534	364	25	the	the	DET
fuelectenerg-7534	364	26	device	device	NOUN
fuelectenerg-7534	364	27	and	and	CCONJ
fuelectenerg-7534	364	28	different	different	ADJ
fuelectenerg-7534	364	29	pads	pad	NOUN
fuelectenerg-7534	364	30	.	.	PUNCT
fuelectenerg-7534	365	1	the	the	DET
fuelectenerg-7534	365	2	most	most	ADV
fuelectenerg-7534	365	3	recent	recent	ADJ
fuelectenerg-7534	365	4	analog	analog	NOUN
fuelectenerg-7534	365	5	implementation	implementation	NOUN
fuelectenerg-7534	365	6	is	be	AUX
fuelectenerg-7534	365	7	offered	offer	VERB
fuelectenerg-7534	365	8	by	by	ADP
fuelectenerg-7534	365	9	[	[	X
fuelectenerg-7534	365	10	92	92	NUM
fuelectenerg-7534	365	11	]	]	PUNCT
fuelectenerg-7534	365	12	,	,	PUNCT
fuelectenerg-7534	365	13	in	in	ADP
fuelectenerg-7534	365	14	which	which	PRON
fuelectenerg-7534	365	15	output	output	NOUN
fuelectenerg-7534	365	16	ports	port	NOUN
fuelectenerg-7534	365	17	of	of	ADP
fuelectenerg-7534	365	18	the	the	DET
fuelectenerg-7534	365	19	lange	lange	NOUN
fuelectenerg-7534	365	20	coupler	coupler	NOUN
fuelectenerg-7534	365	21	are	be	AUX
fuelectenerg-7534	365	22	connected	connect	VERB
fuelectenerg-7534	365	23	to	to	ADP
fuelectenerg-7534	365	24	a	a	DET
fuelectenerg-7534	365	25	lc	lc	NOUN
fuelectenerg-7534	365	26	reflective	reflective	ADJ
fuelectenerg-7534	365	27	load	load	NOUN
fuelectenerg-7534	365	28	(	(	PUNCT
fuelectenerg-7534	365	29	three	three	NUM
fuelectenerg-7534	365	30	inductive	inductive	ADJ
fuelectenerg-7534	365	31	line	line	NOUN
fuelectenerg-7534	365	32	sections	section	NOUN
fuelectenerg-7534	365	33	spaced	space	VERB
fuelectenerg-7534	365	34	out	out	ADP
fuelectenerg-7534	365	35	by	by	ADP
fuelectenerg-7534	365	36	couples	couple	NOUN
fuelectenerg-7534	365	37	of	of	ADP
fuelectenerg-7534	365	38	shunt	shunt	ADJ
fuelectenerg-7534	365	39	varactors	varactor	NOUN
fuelectenerg-7534	365	40	)	)	PUNCT
fuelectenerg-7534	365	41	in	in	ADP
fuelectenerg-7534	365	42	a	a	DET
fuelectenerg-7534	365	43	cpw	cpw	NOUN
fuelectenerg-7534	365	44	configuration	configuration	NOUN
fuelectenerg-7534	365	45	.	.	PUNCT
fuelectenerg-7534	366	1	the	the	DET
fuelectenerg-7534	366	2	capacitance	capacitance	NOUN
fuelectenerg-7534	366	3	of	of	ADP
fuelectenerg-7534	366	4	352	352	NUM
fuelectenerg-7534	366	5	g.	g.	NOUN
fuelectenerg-7534	366	6	tagliapietra	tagliapietra	PROPN
fuelectenerg-7534	366	7	,	,	PUNCT
fuelectenerg-7534	366	8	j.	j.	PROPN
fuelectenerg-7534	366	9	iannacci	iannacci	PROPN
fuelectenerg-7534	366	10	contactless	contactless	PROPN
fuelectenerg-7534	366	11	varactors	varactor	NOUN
fuelectenerg-7534	366	12	loading	load	VERB
fuelectenerg-7534	366	13	the	the	DET
fuelectenerg-7534	366	14	lines	line	NOUN
fuelectenerg-7534	366	15	is	be	AUX
fuelectenerg-7534	366	16	simultaneously	simultaneously	ADV
fuelectenerg-7534	366	17	tuned	tune	VERB
fuelectenerg-7534	366	18	from	from	ADP
fuelectenerg-7534	366	19	85	85	NUM
fuelectenerg-7534	366	20	to	to	PART
fuelectenerg-7534	366	21	200	200	NUM
fuelectenerg-7534	366	22	ff	ff	NOUN
fuelectenerg-7534	366	23	by	by	ADP
fuelectenerg-7534	366	24	the	the	DET
fuelectenerg-7534	366	25	control	control	NOUN
fuelectenerg-7534	366	26	voltage	voltage	NOUN
fuelectenerg-7534	366	27	applied	apply	VERB
fuelectenerg-7534	366	28	to	to	ADP
fuelectenerg-7534	366	29	the	the	DET
fuelectenerg-7534	366	30	pads	pad	NOUN
fuelectenerg-7534	366	31	of	of	ADP
fuelectenerg-7534	366	32	a	a	DET
fuelectenerg-7534	366	33	chevron	chevron	NOUN
fuelectenerg-7534	366	34	electrothermal	electrothermal	ADJ
fuelectenerg-7534	366	35	actuator	actuator	NOUN
fuelectenerg-7534	366	36	,	,	PUNCT
fuelectenerg-7534	366	37	thus	thus	ADV
fuelectenerg-7534	366	38	determining	determine	VERB
fuelectenerg-7534	366	39	the	the	DET
fuelectenerg-7534	366	40	output	output	NOUN
fuelectenerg-7534	366	41	phase	phase	NOUN
fuelectenerg-7534	366	42	shift	shift	NOUN
fuelectenerg-7534	366	43	of	of	ADP
fuelectenerg-7534	366	44	this	this	DET
fuelectenerg-7534	366	45	4x2.6	4x2.6	NUM
fuelectenerg-7534	366	46	mm2	mm2	NOUN
fuelectenerg-7534	366	47	device	device	NOUN
fuelectenerg-7534	366	48	.	.	PUNCT
fuelectenerg-7534	367	1	the	the	DET
fuelectenerg-7534	367	2	continuous	continuous	ADJ
fuelectenerg-7534	367	3	tuning	tuning	NOUN
fuelectenerg-7534	367	4	range	range	NOUN
fuelectenerg-7534	367	5	covers	cover	VERB
fuelectenerg-7534	367	6	120	120	NUM
fuelectenerg-7534	367	7	°	°	NUM
fuelectenerg-7534	367	8	shift	shift	NOUN
fuelectenerg-7534	367	9	,	,	PUNCT
fuelectenerg-7534	367	10	achievable	achievable	ADJ
fuelectenerg-7534	367	11	by	by	ADP
fuelectenerg-7534	367	12	8	8	NUM
fuelectenerg-7534	367	13	v	v	NOUN
fuelectenerg-7534	367	14	control	control	NOUN
fuelectenerg-7534	367	15	signal	signal	NOUN
fuelectenerg-7534	367	16	.	.	PUNCT
fuelectenerg-7534	368	1	table	table	NOUN
fuelectenerg-7534	368	2	5	5	NUM
fuelectenerg-7534	368	3	comparison	comparison	NOUN
fuelectenerg-7534	368	4	between	between	ADP
fuelectenerg-7534	368	5	the	the	DET
fuelectenerg-7534	368	6	different	different	ADJ
fuelectenerg-7534	368	7	discussed	discuss	VERB
fuelectenerg-7534	368	8	realizations	realization	NOUN
fuelectenerg-7534	368	9	,	,	PUNCT
fuelectenerg-7534	368	10	comprehending	comprehending	ADJ
fuelectenerg-7534	368	11	distributed	distribute	VERB
fuelectenerg-7534	368	12	mems	mem	NOUN
fuelectenerg-7534	368	13	transmission	transmission	NOUN
fuelectenerg-7534	368	14	line	line	NOUN
fuelectenerg-7534	368	15	and	and	CCONJ
fuelectenerg-7534	368	16	reflection	reflection	NOUN
fuelectenerg-7534	368	17	type	type	NOUN
fuelectenerg-7534	368	18	topologies	topology	NOUN
fuelectenerg-7534	368	19	.	.	PUNCT
fuelectenerg-7534	369	1	for	for	ADP
fuelectenerg-7534	369	2	each	each	DET
fuelectenerg-7534	369	3	realization	realization	NOUN
fuelectenerg-7534	369	4	,	,	PUNCT
fuelectenerg-7534	369	5	return	return	VERB
fuelectenerg-7534	369	6	loss	loss	NOUN
fuelectenerg-7534	369	7	,	,	PUNCT
fuelectenerg-7534	369	8	insertion	insertion	NOUN
fuelectenerg-7534	369	9	loss	loss	NOUN
fuelectenerg-7534	369	10	,	,	PUNCT
fuelectenerg-7534	369	11	and	and	CCONJ
fuelectenerg-7534	369	12	phase	phase	NOUN
fuelectenerg-7534	369	13	error	error	NOUN
fuelectenerg-7534	369	14	referred	refer	VERB
fuelectenerg-7534	369	15	to	to	ADP
fuelectenerg-7534	369	16	the	the	DET
fuelectenerg-7534	369	17	worst	bad	ADJ
fuelectenerg-7534	369	18	case	case	NOUN
fuelectenerg-7534	369	19	among	among	ADP
fuelectenerg-7534	369	20	the	the	DET
fuelectenerg-7534	369	21	various	various	ADJ
fuelectenerg-7534	369	22	configurations	configuration	NOUN
fuelectenerg-7534	369	23	are	be	AUX
fuelectenerg-7534	369	24	reported	report	VERB
fuelectenerg-7534	369	25	.	.	PUNCT
fuelectenerg-7534	370	1	work	work	NOUN
fuelectenerg-7534	370	2	type	type	NOUN
fuelectenerg-7534	370	3	measured	measure	VERB
fuelectenerg-7534	370	4	@(ghz	@(ghz	PROPN
fuelectenerg-7534	370	5	)	)	PUNCT
fuelectenerg-7534	370	6	ret	ret	PROPN
fuelectenerg-7534	370	7	.	.	PUNCT
fuelectenerg-7534	370	8	loss	loss	PROPN
fuelectenerg-7534	370	9	(	(	PUNCT
fuelectenerg-7534	370	10	db	db	NOUN
fuelectenerg-7534	370	11	)	)	PUNCT
fuelectenerg-7534	370	12	ins	in	NOUN
fuelectenerg-7534	370	13	.	.	PUNCT
fuelectenerg-7534	371	1	loss	loss	NOUN
fuelectenerg-7534	371	2	(	(	PUNCT
fuelectenerg-7534	371	3	db	db	NOUN
fuelectenerg-7534	371	4	)	)	PUNCT
fuelectenerg-7534	371	5	min	min	NOUN
fuelectenerg-7534	371	6	shift	shift	NOUN
fuelectenerg-7534	371	7	(	(	PUNCT
fuelectenerg-7534	371	8	°	°	NOUN
fuelectenerg-7534	371	9	)	)	PUNCT
fuelectenerg-7534	371	10	max	max	PROPN
fuelectenerg-7534	371	11	shift	shift	NOUN
fuelectenerg-7534	371	12	(	(	PUNCT
fuelectenerg-7534	371	13	°	°	NOUN
fuelectenerg-7534	371	14	)	)	PUNCT
fuelectenerg-7534	371	15	error	error	NOUN
fuelectenerg-7534	371	16	(	(	PUNCT
fuelectenerg-7534	371	17	°	°	ADP
fuelectenerg-7534	371	18	)	)	PUNCT
fuelectenerg-7534	372	1	[	[	X
fuelectenerg-7534	372	2	76	76	NUM
fuelectenerg-7534	372	3	]	]	X
fuelectenerg-7534	372	4	dmtl	dmtl	NOUN
fuelectenerg-7534	372	5	30	30	NUM
fuelectenerg-7534	372	6	13	13	NUM
fuelectenerg-7534	372	7	1.7	1.7	NUM
fuelectenerg-7534	372	8	106	106	NUM
fuelectenerg-7534	372	9	[	[	X
fuelectenerg-7534	372	10	78	78	NUM
fuelectenerg-7534	372	11	]	]	X
fuelectenerg-7534	372	12	dmtl	dmtl	NOUN
fuelectenerg-7534	372	13	22	22	NUM
fuelectenerg-7534	372	14	12	12	NUM
fuelectenerg-7534	372	15	3	3	NUM
fuelectenerg-7534	372	16	30	30	NUM
fuelectenerg-7534	372	17	180	180	NUM
fuelectenerg-7534	372	18	[	[	SYM
fuelectenerg-7534	372	19	79	79	NUM
fuelectenerg-7534	372	20	]	]	X
fuelectenerg-7534	372	21	dmtl	dmtl	NOUN
fuelectenerg-7534	372	22	30	30	NUM
fuelectenerg-7534	372	23	16	16	NUM
fuelectenerg-7534	372	24	0.8	0.8	NUM
fuelectenerg-7534	372	25	5.625	5.625	NUM
fuelectenerg-7534	372	26	180	180	NUM
fuelectenerg-7534	372	27	<	<	NOUN
fuelectenerg-7534	372	28	1	1	NUM
fuelectenerg-7534	372	29	[	[	X
fuelectenerg-7534	372	30	83	83	NUM
fuelectenerg-7534	372	31	]	]	X
fuelectenerg-7534	372	32	dmtl	dmtl	NOUN
fuelectenerg-7534	372	33	30	30	NUM
fuelectenerg-7534	372	34	12	12	NUM
fuelectenerg-7534	372	35	2.55	2.55	NUM
fuelectenerg-7534	372	36	170	170	NUM
fuelectenerg-7534	372	37	[	[	X
fuelectenerg-7534	372	38	85	85	NUM
fuelectenerg-7534	372	39	]	]	X
fuelectenerg-7534	372	40	dmtl	dmtl	NOUN
fuelectenerg-7534	372	41	40	40	NUM
fuelectenerg-7534	372	42	9.9	9.9	NUM
fuelectenerg-7534	372	43	15.1	15.1	NUM
fuelectenerg-7534	372	44	11.25	11.25	NUM
fuelectenerg-7534	372	45	348.75	348.75	NUM
fuelectenerg-7534	372	46	3.72	3.72	NUM
fuelectenerg-7534	372	47	[	[	PUNCT
fuelectenerg-7534	372	48	84	84	NUM
fuelectenerg-7534	372	49	]	]	X
fuelectenerg-7534	372	50	dmtl	dmtl	NOUN
fuelectenerg-7534	372	51	35	35	NUM
fuelectenerg-7534	372	52	14	14	NUM
fuelectenerg-7534	372	53	-	-	SYM
fuelectenerg-7534	372	54	12	12	NUM
fuelectenerg-7534	372	55	3.8	3.8	NUM
fuelectenerg-7534	372	56	-	-	SYM
fuelectenerg-7534	372	57	5.4	5.4	NUM
fuelectenerg-7534	372	58	45	45	NUM
fuelectenerg-7534	372	59	-	-	SYM
fuelectenerg-7534	372	60	22.5	22.5	NUM
fuelectenerg-7534	372	61	315	315	NUM
fuelectenerg-7534	372	62	-	-	SYM
fuelectenerg-7534	372	63	337.5	337.5	NUM
fuelectenerg-7534	372	64	2.3	2.3	NUM
fuelectenerg-7534	372	65	-	-	SYM
fuelectenerg-7534	372	66	3.8	3.8	NUM
fuelectenerg-7534	372	67	[	[	X
fuelectenerg-7534	372	68	86	86	NUM
fuelectenerg-7534	372	69	]	]	PUNCT
fuelectenerg-7534	372	70	rt	rt	PROPN
fuelectenerg-7534	372	71	26	26	NUM
fuelectenerg-7534	372	72	7	7	NUM
fuelectenerg-7534	372	73	2.5	2.5	NUM
fuelectenerg-7534	372	74	45	45	NUM
fuelectenerg-7534	372	75	225	225	NUM
fuelectenerg-7534	372	76	[	[	X
fuelectenerg-7534	372	77	87	87	NUM
fuelectenerg-7534	372	78	]	]	PUNCT
fuelectenerg-7534	372	79	rt	rt	PROPN
fuelectenerg-7534	372	80	15	15	NUM
fuelectenerg-7534	372	81	-	-	SYM
fuelectenerg-7534	372	82	21	21	NUM
fuelectenerg-7534	372	83	10	10	NUM
fuelectenerg-7534	372	84	-	-	SYM
fuelectenerg-7534	372	85	12	12	NUM
fuelectenerg-7534	372	86	2.2	2.2	NUM
fuelectenerg-7534	372	87	-	-	SYM
fuelectenerg-7534	372	88	2.2	2.2	NUM
fuelectenerg-7534	372	89	22	22	NUM
fuelectenerg-7534	372	90	-	-	SYM
fuelectenerg-7534	372	91	22	22	NUM
fuelectenerg-7534	372	92	337	337	NUM
fuelectenerg-7534	372	93	-	-	SYM
fuelectenerg-7534	372	94	337	337	NUM
fuelectenerg-7534	372	95	7	7	NUM
fuelectenerg-7534	372	96	-	-	SYM
fuelectenerg-7534	372	97	5.3	5.3	NUM
fuelectenerg-7534	372	98	[	[	X
fuelectenerg-7534	372	99	88	88	NUM
fuelectenerg-7534	372	100	]	]	X
fuelectenerg-7534	372	101	rt	rt	PROPN
fuelectenerg-7534	372	102	2	2	NUM
fuelectenerg-7534	372	103	21	21	NUM
fuelectenerg-7534	372	104	0.93	0.93	NUM
fuelectenerg-7534	372	105	11.25	11.25	NUM
fuelectenerg-7534	372	106	123.75	123.75	NUM
fuelectenerg-7534	372	107	5	5	NUM
fuelectenerg-7534	372	108	[	[	X
fuelectenerg-7534	372	109	90	90	NUM
fuelectenerg-7534	372	110	]	]	PUNCT
fuelectenerg-7534	372	111	rt	rt	PROPN
fuelectenerg-7534	372	112	2	2	NUM
fuelectenerg-7534	372	113	25	25	NUM
fuelectenerg-7534	372	114	2.4	2.4	NUM
fuelectenerg-7534	372	115	360	360	NUM
fuelectenerg-7534	372	116	11.25	11.25	NUM
fuelectenerg-7534	372	117	[	[	X
fuelectenerg-7534	372	118	91	91	NUM
fuelectenerg-7534	372	119	]	]	PUNCT
fuelectenerg-7534	372	120	rt	rt	PROPN
fuelectenerg-7534	372	121	20	20	NUM
fuelectenerg-7534	372	122	13.61	13.61	NUM
fuelectenerg-7534	372	123	1.61	1.61	NUM
fuelectenerg-7534	372	124	45	45	NUM
fuelectenerg-7534	372	125	135	135	NUM
fuelectenerg-7534	372	126	1.15	1.15	NUM
fuelectenerg-7534	372	127	[	[	X
fuelectenerg-7534	372	128	89	89	NUM
fuelectenerg-7534	372	129	]	]	X
fuelectenerg-7534	372	130	rt	rt	PROPN
fuelectenerg-7534	372	131	74	74	NUM
fuelectenerg-7534	372	132	18	18	NUM
fuelectenerg-7534	372	133	4.9	4.9	NUM
fuelectenerg-7534	372	134	22.5	22.5	NUM
fuelectenerg-7534	372	135	195	195	NUM
fuelectenerg-7534	372	136	8.6	8.6	NUM
fuelectenerg-7534	372	137	[	[	X
fuelectenerg-7534	372	138	92	92	NUM
fuelectenerg-7534	372	139	]	]	PUNCT
fuelectenerg-7534	372	140	rt	rt	PROPN
fuelectenerg-7534	372	141	28	28	NUM
fuelectenerg-7534	372	142	15	15	NUM
fuelectenerg-7534	372	143	6.35	6.35	NUM
fuelectenerg-7534	372	144	120	120	NUM
fuelectenerg-7534	372	145	5	5	NUM
fuelectenerg-7534	372	146	.	.	PUNCT
fuelectenerg-7534	372	147	attenuators	attenuator	NOUN
fuelectenerg-7534	372	148	differently	differently	ADV
fuelectenerg-7534	372	149	from	from	ADP
fuelectenerg-7534	372	150	the	the	DET
fuelectenerg-7534	372	151	previous	previous	ADJ
fuelectenerg-7534	372	152	two	two	NUM
fuelectenerg-7534	372	153	kinds	kind	NOUN
fuelectenerg-7534	372	154	of	of	ADP
fuelectenerg-7534	372	155	device	device	NOUN
fuelectenerg-7534	372	156	,	,	PUNCT
fuelectenerg-7534	372	157	rf	rf	NOUN
fuelectenerg-7534	372	158	-	-	PUNCT
fuelectenerg-7534	372	159	mems	mem	NOUN
fuelectenerg-7534	372	160	based	base	VERB
fuelectenerg-7534	372	161	attenuators	attenuator	NOUN
fuelectenerg-7534	372	162	are	be	AUX
fuelectenerg-7534	372	163	not	not	PART
fuelectenerg-7534	372	164	characterized	characterize	VERB
fuelectenerg-7534	372	165	by	by	ADP
fuelectenerg-7534	372	166	a	a	DET
fuelectenerg-7534	372	167	dense	dense	ADJ
fuelectenerg-7534	372	168	presence	presence	NOUN
fuelectenerg-7534	372	169	of	of	ADP
fuelectenerg-7534	372	170	scientific	scientific	ADJ
fuelectenerg-7534	372	171	literature	literature	NOUN
fuelectenerg-7534	372	172	,	,	PUNCT
fuelectenerg-7534	372	173	remaining	remain	VERB
fuelectenerg-7534	372	174	a	a	DET
fuelectenerg-7534	372	175	relatively	relatively	ADV
fuelectenerg-7534	372	176	niche	niche	NOUN
fuelectenerg-7534	372	177	scenario	scenario	NOUN
fuelectenerg-7534	372	178	.	.	PUNCT
fuelectenerg-7534	373	1	nonetheless	nonetheless	ADV
fuelectenerg-7534	373	2	they	they	PRON
fuelectenerg-7534	373	3	also	also	ADV
fuelectenerg-7534	373	4	represent	represent	VERB
fuelectenerg-7534	373	5	key	key	ADJ
fuelectenerg-7534	373	6	components	component	NOUN
fuelectenerg-7534	373	7	in	in	ADP
fuelectenerg-7534	373	8	the	the	DET
fuelectenerg-7534	373	9	evolution	evolution	NOUN
fuelectenerg-7534	373	10	towards	towards	ADP
fuelectenerg-7534	373	11	the	the	DET
fuelectenerg-7534	373	12	iot	iot	NOUN
fuelectenerg-7534	373	13	and	and	CCONJ
fuelectenerg-7534	373	14	5	5	NUM
fuelectenerg-7534	373	15	g	g	NOUN
fuelectenerg-7534	373	16	paradigms	paradigm	NOUN
fuelectenerg-7534	373	17	,	,	PUNCT
fuelectenerg-7534	373	18	together	together	ADV
fuelectenerg-7534	373	19	with	with	ADP
fuelectenerg-7534	373	20	impedance	impedance	NOUN
fuelectenerg-7534	373	21	tuners	tuner	NOUN
fuelectenerg-7534	373	22	,	,	PUNCT
fuelectenerg-7534	373	23	filters	filter	NOUN
fuelectenerg-7534	373	24	and	and	CCONJ
fuelectenerg-7534	373	25	resonators	resonator	NOUN
fuelectenerg-7534	373	26	.	.	PUNCT
fuelectenerg-7534	374	1	among	among	ADP
fuelectenerg-7534	374	2	the	the	DET
fuelectenerg-7534	374	3	remarkable	remarkable	ADJ
fuelectenerg-7534	374	4	characteristics	characteristic	NOUN
fuelectenerg-7534	374	5	typical	typical	ADJ
fuelectenerg-7534	374	6	of	of	ADP
fuelectenerg-7534	374	7	rf	rf	NOUN
fuelectenerg-7534	374	8	mems	mem	NOUN
fuelectenerg-7534	374	9	,	,	PUNCT
fuelectenerg-7534	374	10	in	in	ADP
fuelectenerg-7534	374	11	case	case	NOUN
fuelectenerg-7534	374	12	of	of	ADP
fuelectenerg-7534	374	13	attenuators	attenuator	NOUN
fuelectenerg-7534	374	14	the	the	DET
fuelectenerg-7534	374	15	most	most	ADV
fuelectenerg-7534	374	16	valuable	valuable	ADJ
fuelectenerg-7534	374	17	are	be	AUX
fuelectenerg-7534	374	18	represented	represent	VERB
fuelectenerg-7534	374	19	by	by	ADP
fuelectenerg-7534	374	20	reconfigurability	reconfigurability	NOUN
fuelectenerg-7534	374	21	,	,	PUNCT
fuelectenerg-7534	374	22	broadband	broadband	NOUN
fuelectenerg-7534	374	23	behavior	behavior	NOUN
fuelectenerg-7534	374	24	and	and	CCONJ
fuelectenerg-7534	374	25	good	good	ADJ
fuelectenerg-7534	374	26	linearity	linearity	NOUN
fuelectenerg-7534	374	27	.	.	PUNCT
fuelectenerg-7534	375	1	desirable	desirable	ADJ
fuelectenerg-7534	375	2	attenuators	attenuator	NOUN
fuelectenerg-7534	375	3	should	should	AUX
fuelectenerg-7534	375	4	exhibit	exhibit	VERB
fuelectenerg-7534	375	5	multiple	multiple	ADJ
fuelectenerg-7534	375	6	configurations	configuration	NOUN
fuelectenerg-7534	375	7	of	of	ADP
fuelectenerg-7534	375	8	attenuation	attenuation	NOUN
fuelectenerg-7534	375	9	,	,	PUNCT
fuelectenerg-7534	375	10	each	each	DET
fuelectenerg-7534	375	11	one	one	NOUN
fuelectenerg-7534	375	12	with	with	ADP
fuelectenerg-7534	375	13	a	a	DET
fuelectenerg-7534	375	14	flat	flat	ADJ
fuelectenerg-7534	375	15	and	and	CCONJ
fuelectenerg-7534	375	16	stable	stable	ADJ
fuelectenerg-7534	375	17	value	value	NOUN
fuelectenerg-7534	375	18	of	of	ADP
fuelectenerg-7534	375	19	impedance	impedance	NOUN
fuelectenerg-7534	375	20	along	along	ADP
fuelectenerg-7534	375	21	a	a	DET
fuelectenerg-7534	375	22	wide	wide	ADJ
fuelectenerg-7534	375	23	range	range	NOUN
fuelectenerg-7534	375	24	of	of	ADP
fuelectenerg-7534	375	25	frequencies	frequency	NOUN
fuelectenerg-7534	375	26	.	.	PUNCT
fuelectenerg-7534	376	1	table	table	NOUN
fuelectenerg-7534	376	2	6	6	NUM
fuelectenerg-7534	376	3	is	be	AUX
fuelectenerg-7534	376	4	provided	provide	VERB
fuelectenerg-7534	376	5	at	at	ADP
fuelectenerg-7534	376	6	the	the	DET
fuelectenerg-7534	376	7	end	end	NOUN
fuelectenerg-7534	376	8	of	of	ADP
fuelectenerg-7534	376	9	the	the	DET
fuelectenerg-7534	376	10	present	present	ADJ
fuelectenerg-7534	376	11	section	section	NOUN
fuelectenerg-7534	376	12	for	for	ADP
fuelectenerg-7534	376	13	a	a	DET
fuelectenerg-7534	376	14	better	well	ADJ
fuelectenerg-7534	376	15	comparison	comparison	NOUN
fuelectenerg-7534	376	16	of	of	ADP
fuelectenerg-7534	376	17	the	the	DET
fuelectenerg-7534	376	18	discussed	discuss	VERB
fuelectenerg-7534	376	19	proposals	proposal	NOUN
fuelectenerg-7534	376	20	in	in	ADP
fuelectenerg-7534	376	21	terms	term	NOUN
fuelectenerg-7534	376	22	of	of	ADP
fuelectenerg-7534	376	23	their	their	PRON
fuelectenerg-7534	376	24	characteristic	characteristic	ADJ
fuelectenerg-7534	376	25	parameters	parameter	NOUN
fuelectenerg-7534	376	26	.	.	PUNCT
fuelectenerg-7534	377	1	from	from	ADP
fuelectenerg-7534	377	2	a	a	DET
fuelectenerg-7534	377	3	general	general	ADJ
fuelectenerg-7534	377	4	point	point	NOUN
fuelectenerg-7534	377	5	of	of	ADP
fuelectenerg-7534	377	6	view	view	NOUN
fuelectenerg-7534	377	7	,	,	PUNCT
fuelectenerg-7534	377	8	devices	device	NOUN
fuelectenerg-7534	377	9	operating	operate	VERB
fuelectenerg-7534	377	10	by	by	ADP
fuelectenerg-7534	377	11	both	both	DET
fuelectenerg-7534	377	12	digital	digital	ADJ
fuelectenerg-7534	377	13	or	or	CCONJ
fuelectenerg-7534	377	14	analog	analog	NOUN
fuelectenerg-7534	377	15	control	control	NOUN
fuelectenerg-7534	377	16	are	be	AUX
fuelectenerg-7534	377	17	present	present	ADJ
fuelectenerg-7534	377	18	in	in	ADP
fuelectenerg-7534	377	19	the	the	DET
fuelectenerg-7534	377	20	literature	literature	NOUN
fuelectenerg-7534	377	21	.	.	PUNCT
fuelectenerg-7534	378	1	since	since	SCONJ
fuelectenerg-7534	378	2	the	the	DET
fuelectenerg-7534	378	3	first	first	ADJ
fuelectenerg-7534	378	4	decade	decade	NOUN
fuelectenerg-7534	378	5	of	of	ADP
fuelectenerg-7534	378	6	the	the	DET
fuelectenerg-7534	378	7	new	new	ADJ
fuelectenerg-7534	378	8	millennium	millennium	NOUN
fuelectenerg-7534	378	9	,	,	PUNCT
fuelectenerg-7534	378	10	the	the	DET
fuelectenerg-7534	378	11	first	first	ADJ
fuelectenerg-7534	378	12	one	one	NOUN
fuelectenerg-7534	378	13	is	be	AUX
fuelectenerg-7534	378	14	the	the	DET
fuelectenerg-7534	378	15	most	most	ADV
fuelectenerg-7534	378	16	widespread	widespread	ADJ
fuelectenerg-7534	378	17	,	,	PUNCT
fuelectenerg-7534	378	18	as	as	SCONJ
fuelectenerg-7534	378	19	it	it	PRON
fuelectenerg-7534	378	20	is	be	AUX
fuelectenerg-7534	378	21	possible	possible	ADJ
fuelectenerg-7534	378	22	to	to	PART
fuelectenerg-7534	378	23	observe	observe	VERB
fuelectenerg-7534	378	24	by	by	ADP
fuelectenerg-7534	378	25	looking	look	VERB
fuelectenerg-7534	378	26	at	at	ADP
fuelectenerg-7534	378	27	[	[	X
fuelectenerg-7534	378	28	93][94	93][94	NOUN
fuelectenerg-7534	378	29	]	]	PUNCT
fuelectenerg-7534	378	30	.	.	PUNCT
fuelectenerg-7534	379	1	in	in	ADP
fuelectenerg-7534	379	2	[	[	X
fuelectenerg-7534	379	3	93	93	NUM
fuelectenerg-7534	379	4	]	]	PUNCT
fuelectenerg-7534	379	5	a	a	DET
fuelectenerg-7534	379	6	6	6	NUM
fuelectenerg-7534	379	7	-	-	PUNCT
fuelectenerg-7534	379	8	bit	bit	NOUN
fuelectenerg-7534	379	9	attenuator	attenuator	NOUN
fuelectenerg-7534	379	10	is	be	AUX
fuelectenerg-7534	379	11	presented	present	VERB
fuelectenerg-7534	379	12	:	:	PUNCT
fuelectenerg-7534	379	13	within	within	ADP
fuelectenerg-7534	379	14	the	the	DET
fuelectenerg-7534	379	15	8.77	8.77	NUM
fuelectenerg-7534	379	16	mm2	mm2	NOUN
fuelectenerg-7534	379	17	device	device	NOUN
fuelectenerg-7534	379	18	encompassed	encompass	VERB
fuelectenerg-7534	379	19	in	in	ADP
fuelectenerg-7534	379	20	cpw	cpw	NOUN
fuelectenerg-7534	379	21	configuration	configuration	NOUN
fuelectenerg-7534	379	22	,	,	PUNCT
fuelectenerg-7534	379	23	two	two	NUM
fuelectenerg-7534	379	24	spdt	spdt	NOUN
fuelectenerg-7534	379	25	switches	switch	NOUN
fuelectenerg-7534	379	26	and	and	CCONJ
fuelectenerg-7534	379	27	two	two	NUM
fuelectenerg-7534	379	28	branches	branch	NOUN
fuelectenerg-7534	379	29	loaded	load	VERB
fuelectenerg-7534	379	30	with	with	ADP
fuelectenerg-7534	379	31	six	six	NUM
fuelectenerg-7534	379	32	series	series	NOUN
fuelectenerg-7534	379	33	resistors	resistor	NOUN
fuelectenerg-7534	379	34	and	and	CCONJ
fuelectenerg-7534	379	35	corresponding	correspond	VERB
fuelectenerg-7534	379	36	bypass	bypass	NOUN
fuelectenerg-7534	379	37	cantilever	cantilever	NOUN
fuelectenerg-7534	379	38	membranes	membrane	NOUN
fuelectenerg-7534	379	39	are	be	AUX
fuelectenerg-7534	379	40	comprised	comprise	VERB
fuelectenerg-7534	379	41	.	.	PUNCT
fuelectenerg-7534	380	1	while	while	SCONJ
fuelectenerg-7534	380	2	switches	switch	NOUN
fuelectenerg-7534	380	3	are	be	AUX
fuelectenerg-7534	380	4	meant	mean	VERB
fuelectenerg-7534	380	5	to	to	PART
fuelectenerg-7534	380	6	select	select	VERB
fuelectenerg-7534	380	7	one	one	NUM
fuelectenerg-7534	380	8	branch	branch	NOUN
fuelectenerg-7534	380	9	or	or	CCONJ
fuelectenerg-7534	380	10	another	another	PRON
fuelectenerg-7534	380	11	by	by	ADP
fuelectenerg-7534	380	12	~15	~15	X
fuelectenerg-7534	380	13	v	v	NUM
fuelectenerg-7534	380	14	actuation	actuation	NOUN
fuelectenerg-7534	380	15	,	,	PUNCT
fuelectenerg-7534	380	16	cantilevers	cantilever	NOUN
fuelectenerg-7534	380	17	will	will	AUX
fuelectenerg-7534	380	18	shorten	shorten	VERB
fuelectenerg-7534	380	19	or	or	CCONJ
fuelectenerg-7534	380	20	load	load	VERB
fuelectenerg-7534	380	21	resistors	resistor	NOUN
fuelectenerg-7534	380	22	on	on	ADP
fuelectenerg-7534	380	23	the	the	DET
fuelectenerg-7534	380	24	selected	select	VERB
fuelectenerg-7534	380	25	branch	branch	NOUN
fuelectenerg-7534	380	26	.	.	PUNCT
fuelectenerg-7534	381	1	with	with	ADP
fuelectenerg-7534	381	2	64	64	NUM
fuelectenerg-7534	381	3	possible	possible	ADJ
fuelectenerg-7534	381	4	impedance	impedance	NOUN
fuelectenerg-7534	381	5	states	state	NOUN
fuelectenerg-7534	381	6	,	,	PUNCT
fuelectenerg-7534	381	7	the	the	DET
fuelectenerg-7534	381	8	device	device	NOUN
fuelectenerg-7534	381	9	demonstrated	demonstrate	VERB
fuelectenerg-7534	381	10	remarkable	remarkable	ADJ
fuelectenerg-7534	381	11	a	a	DET
fuelectenerg-7534	381	12	comprehensive	comprehensive	ADJ
fuelectenerg-7534	381	13	overview	overview	NOUN
fuelectenerg-7534	381	14	of	of	ADP
fuelectenerg-7534	381	15	recent	recent	ADJ
fuelectenerg-7534	381	16	developments	development	NOUN
fuelectenerg-7534	381	17	in	in	ADP
fuelectenerg-7534	381	18	rf	rf	ADJ
fuelectenerg-7534	381	19	-	-	PUNCT
fuelectenerg-7534	381	20	mems	mems	ADJ
fuelectenerg-7534	381	21	technology	technology	NOUN
fuelectenerg-7534	381	22	353	353	NUM
fuelectenerg-7534	381	23	linear	linear	ADJ
fuelectenerg-7534	381	24	performances	performance	NOUN
fuelectenerg-7534	381	25	in	in	ADP
fuelectenerg-7534	381	26	terms	term	NOUN
fuelectenerg-7534	381	27	of	of	ADP
fuelectenerg-7534	381	28	insertion	insertion	NOUN
fuelectenerg-7534	381	29	and	and	CCONJ
fuelectenerg-7534	381	30	return	return	VERB
fuelectenerg-7534	381	31	loss	loss	NOUN
fuelectenerg-7534	381	32	.	.	PUNCT
fuelectenerg-7534	382	1	conceptually	conceptually	ADV
fuelectenerg-7534	382	2	similar	similar	ADJ
fuelectenerg-7534	382	3	,	,	PUNCT
fuelectenerg-7534	382	4	[	[	X
fuelectenerg-7534	382	5	94	94	NUM
fuelectenerg-7534	382	6	]	]	PUNCT
fuelectenerg-7534	382	7	proposes	propose	VERB
fuelectenerg-7534	382	8	a	a	DET
fuelectenerg-7534	382	9	cpw	cpw	NOUN
fuelectenerg-7534	382	10	-	-	PUNCT
fuelectenerg-7534	382	11	based	base	VERB
fuelectenerg-7534	382	12	structure	structure	NOUN
fuelectenerg-7534	382	13	in	in	ADP
fuelectenerg-7534	382	14	which	which	DET
fuelectenerg-7534	382	15	signal	signal	NOUN
fuelectenerg-7534	382	16	line	line	NOUN
fuelectenerg-7534	382	17	crosses	cross	VERB
fuelectenerg-7534	382	18	an	an	DET
fuelectenerg-7534	382	19	initial	initial	ADJ
fuelectenerg-7534	382	20	section	section	NOUN
fuelectenerg-7534	382	21	with	with	ADP
fuelectenerg-7534	382	22	3	3	NUM
fuelectenerg-7534	382	23	series	series	NOUN
fuelectenerg-7534	382	24	resistors	resistor	NOUN
fuelectenerg-7534	382	25	,	,	PUNCT
fuelectenerg-7534	382	26	and	and	CCONJ
fuelectenerg-7534	382	27	then	then	ADV
fuelectenerg-7534	382	28	separates	separate	VERB
fuelectenerg-7534	382	29	into	into	ADP
fuelectenerg-7534	382	30	two	two	NUM
fuelectenerg-7534	382	31	parallel	parallel	ADJ
fuelectenerg-7534	382	32	lines	line	NOUN
fuelectenerg-7534	382	33	:	:	PUNCT
fuelectenerg-7534	382	34	each	each	PRON
fuelectenerg-7534	382	35	loaded	load	VERB
fuelectenerg-7534	382	36	with	with	ADP
fuelectenerg-7534	382	37	3	3	NUM
fuelectenerg-7534	382	38	resistors	resistor	NOUN
fuelectenerg-7534	382	39	and	and	CCONJ
fuelectenerg-7534	382	40	their	their	PRON
fuelectenerg-7534	382	41	movable	movable	ADJ
fuelectenerg-7534	382	42	membrane	membrane	NOUN
fuelectenerg-7534	382	43	.	.	PUNCT
fuelectenerg-7534	383	1	the	the	DET
fuelectenerg-7534	383	2	two	two	NUM
fuelectenerg-7534	383	3	branches	branch	NOUN
fuelectenerg-7534	383	4	eventually	eventually	ADV
fuelectenerg-7534	383	5	meet	meet	VERB
fuelectenerg-7534	383	6	to	to	PART
fuelectenerg-7534	383	7	form	form	VERB
fuelectenerg-7534	383	8	the	the	DET
fuelectenerg-7534	383	9	output	output	NOUN
fuelectenerg-7534	383	10	line	line	NOUN
fuelectenerg-7534	383	11	,	,	PUNCT
fuelectenerg-7534	383	12	as	as	SCONJ
fuelectenerg-7534	383	13	shown	show	VERB
fuelectenerg-7534	383	14	in	in	ADP
fuelectenerg-7534	383	15	figure	figure	NOUN
fuelectenerg-7534	383	16	8a	8a	NUM
fuelectenerg-7534	383	17	.	.	PUNCT
fuelectenerg-7534	384	1	by	by	ADP
fuelectenerg-7534	384	2	an	an	DET
fuelectenerg-7534	384	3	actuation	actuation	NOUN
fuelectenerg-7534	384	4	voltage	voltage	NOUN
fuelectenerg-7534	384	5	between	between	ADP
fuelectenerg-7534	384	6	70	70	NUM
fuelectenerg-7534	384	7	and	and	CCONJ
fuelectenerg-7534	384	8	80	80	NUM
fuelectenerg-7534	384	9	v	v	NOUN
fuelectenerg-7534	384	10	,	,	PUNCT
fuelectenerg-7534	384	11	and	and	CCONJ
fuelectenerg-7534	384	12	by	by	ADP
fuelectenerg-7534	384	13	7	7	NUM
fuelectenerg-7534	384	14	-	-	PUNCT
fuelectenerg-7534	384	15	bit	bit	NOUN
fuelectenerg-7534	384	16	sequences	sequence	NOUN
fuelectenerg-7534	384	17	is	be	AUX
fuelectenerg-7534	384	18	then	then	ADV
fuelectenerg-7534	384	19	possible	possible	ADJ
fuelectenerg-7534	384	20	to	to	PART
fuelectenerg-7534	384	21	control	control	VERB
fuelectenerg-7534	384	22	128	128	NUM
fuelectenerg-7534	384	23	possible	possible	ADJ
fuelectenerg-7534	384	24	impedance	impedance	NOUN
fuelectenerg-7534	384	25	states	state	NOUN
fuelectenerg-7534	384	26	.	.	PUNCT
fuelectenerg-7534	385	1	also	also	ADV
fuelectenerg-7534	385	2	in	in	ADP
fuelectenerg-7534	385	3	this	this	DET
fuelectenerg-7534	385	4	case	case	NOUN
fuelectenerg-7534	385	5	the	the	DET
fuelectenerg-7534	385	6	performances	performance	NOUN
fuelectenerg-7534	385	7	are	be	AUX
fuelectenerg-7534	385	8	stable	stable	ADJ
fuelectenerg-7534	385	9	,	,	PUNCT
fuelectenerg-7534	385	10	demonstrated	demonstrate	VERB
fuelectenerg-7534	385	11	over	over	ADP
fuelectenerg-7534	385	12	a	a	DET
fuelectenerg-7534	385	13	wider	wide	ADJ
fuelectenerg-7534	385	14	interval	interval	NOUN
fuelectenerg-7534	385	15	.	.	PUNCT
fuelectenerg-7534	386	1	fig	fig	NOUN
fuelectenerg-7534	386	2	.	.	PUNCT
fuelectenerg-7534	387	1	8	8	NUM
fuelectenerg-7534	387	2	(	(	PUNCT
fuelectenerg-7534	387	3	a	a	NOUN
fuelectenerg-7534	387	4	)	)	PUNCT
fuelectenerg-7534	387	5	complete	complete	ADJ
fuelectenerg-7534	387	6	architecture	architecture	NOUN
fuelectenerg-7534	387	7	described	describe	VERB
fuelectenerg-7534	387	8	in	in	ADP
fuelectenerg-7534	387	9	[	[	X
fuelectenerg-7534	387	10	94	94	NUM
fuelectenerg-7534	387	11	]	]	PUNCT
fuelectenerg-7534	387	12	,	,	PUNCT
fuelectenerg-7534	387	13	(	(	PUNCT
fuelectenerg-7534	387	14	b	b	X
fuelectenerg-7534	387	15	)	)	PUNCT
fuelectenerg-7534	387	16	schematic	schematic	ADJ
fuelectenerg-7534	387	17	of	of	ADP
fuelectenerg-7534	387	18	device	device	NOUN
fuelectenerg-7534	387	19	proposed	propose	VERB
fuelectenerg-7534	387	20	in	in	ADP
fuelectenerg-7534	387	21	[	[	X
fuelectenerg-7534	387	22	96	96	NUM
fuelectenerg-7534	387	23	]	]	PUNCT
fuelectenerg-7534	387	24	.	.	PUNCT
fuelectenerg-7534	388	1	substantially	substantially	ADV
fuelectenerg-7534	388	2	new	new	ADJ
fuelectenerg-7534	388	3	contributions	contribution	NOUN
fuelectenerg-7534	388	4	appeared	appear	VERB
fuelectenerg-7534	388	5	only	only	ADV
fuelectenerg-7534	388	6	in	in	ADP
fuelectenerg-7534	388	7	the	the	DET
fuelectenerg-7534	388	8	last	last	ADJ
fuelectenerg-7534	388	9	half	half	NOUN
fuelectenerg-7534	388	10	decade	decade	NOUN
fuelectenerg-7534	388	11	with	with	ADP
fuelectenerg-7534	388	12	[	[	X
fuelectenerg-7534	388	13	95][96	95][96	X
fuelectenerg-7534	388	14	]	]	X
fuelectenerg-7534	388	15	,	,	PUNCT
fuelectenerg-7534	388	16	both	both	PRON
fuelectenerg-7534	388	17	proposing	propose	VERB
fuelectenerg-7534	388	18	3	3	NUM
fuelectenerg-7534	388	19	-	-	PUNCT
fuelectenerg-7534	388	20	bit	bit	NOUN
fuelectenerg-7534	388	21	attenuators	attenuator	NOUN
fuelectenerg-7534	388	22	enclosed	enclose	VERB
fuelectenerg-7534	388	23	in	in	ADP
fuelectenerg-7534	388	24	cpw	cpw	NOUN
fuelectenerg-7534	388	25	configuration	configuration	NOUN
fuelectenerg-7534	388	26	and	and	CCONJ
fuelectenerg-7534	388	27	demonstrated	demonstrate	VERB
fuelectenerg-7534	388	28	up	up	ADP
fuelectenerg-7534	388	29	to	to	PART
fuelectenerg-7534	388	30	20	20	NUM
fuelectenerg-7534	388	31	ghz	ghz	NOUN
fuelectenerg-7534	388	32	.	.	PUNCT
fuelectenerg-7534	389	1	with	with	ADP
fuelectenerg-7534	389	2	a	a	DET
fuelectenerg-7534	389	3	reduced	reduced	ADJ
fuelectenerg-7534	389	4	footprint	footprint	NOUN
fuelectenerg-7534	389	5	of	of	ADP
fuelectenerg-7534	389	6	3.2	3.2	NUM
fuelectenerg-7534	389	7	mm2	mm2	NOUN
fuelectenerg-7534	389	8	,	,	PUNCT
fuelectenerg-7534	389	9	[	[	X
fuelectenerg-7534	389	10	96	96	NUM
fuelectenerg-7534	389	11	]	]	PUNCT
fuelectenerg-7534	389	12	offers	offer	VERB
fuelectenerg-7534	389	13	a	a	DET
fuelectenerg-7534	389	14	structure	structure	NOUN
fuelectenerg-7534	389	15	composed	compose	VERB
fuelectenerg-7534	389	16	by	by	ADP
fuelectenerg-7534	389	17	three	three	NUM
fuelectenerg-7534	389	18	equal	equal	ADJ
fuelectenerg-7534	389	19	subunits	subunit	NOUN
fuelectenerg-7534	389	20	in	in	ADP
fuelectenerg-7534	389	21	series	series	NOUN
fuelectenerg-7534	389	22	on	on	ADP
fuelectenerg-7534	389	23	the	the	DET
fuelectenerg-7534	389	24	main	main	ADJ
fuelectenerg-7534	389	25	signal	signal	NOUN
fuelectenerg-7534	389	26	line	line	NOUN
fuelectenerg-7534	389	27	,	,	PUNCT
fuelectenerg-7534	389	28	determining	determine	VERB
fuelectenerg-7534	389	29	an	an	DET
fuelectenerg-7534	389	30	attenuation	attenuation	NOUN
fuelectenerg-7534	389	31	of	of	ADP
fuelectenerg-7534	389	32	5	5	NUM
fuelectenerg-7534	389	33	,	,	PUNCT
fuelectenerg-7534	389	34	10	10	NUM
fuelectenerg-7534	389	35	,	,	PUNCT
fuelectenerg-7534	389	36	20	20	NUM
fuelectenerg-7534	389	37	db	db	NOUN
fuelectenerg-7534	389	38	respectively	respectively	ADV
fuelectenerg-7534	389	39	.	.	PUNCT
fuelectenerg-7534	390	1	as	as	SCONJ
fuelectenerg-7534	390	2	depicted	depict	VERB
fuelectenerg-7534	390	3	by	by	ADP
fuelectenerg-7534	390	4	the	the	DET
fuelectenerg-7534	390	5	schematic	schematic	ADJ
fuelectenerg-7534	390	6	of	of	ADP
fuelectenerg-7534	390	7	figure	figure	NOUN
fuelectenerg-7534	390	8	8b	8b	NUM
fuelectenerg-7534	390	9	,	,	PUNCT
fuelectenerg-7534	390	10	each	each	DET
fuelectenerg-7534	390	11	sub	sub	NOUN
fuelectenerg-7534	390	12	-	-	NOUN
fuelectenerg-7534	390	13	unit	unit	NOUN
fuelectenerg-7534	390	14	is	be	AUX
fuelectenerg-7534	390	15	composed	compose	VERB
fuelectenerg-7534	390	16	by	by	ADP
fuelectenerg-7534	390	17	a	a	DET
fuelectenerg-7534	390	18	t	t	ADV
fuelectenerg-7534	390	19	-	-	PUNCT
fuelectenerg-7534	390	20	shaped	shape	VERB
fuelectenerg-7534	390	21	resistive	resistive	ADJ
fuelectenerg-7534	390	22	network	network	NOUN
fuelectenerg-7534	390	23	and	and	CCONJ
fuelectenerg-7534	390	24	two	two	NUM
fuelectenerg-7534	390	25	cantilever	cantilever	NOUN
fuelectenerg-7534	390	26	switches	switch	NOUN
fuelectenerg-7534	390	27	:	:	PUNCT
fuelectenerg-7534	390	28	one	one	NUM
fuelectenerg-7534	390	29	switch	switch	NOUN
fuelectenerg-7534	390	30	rules	rule	NOUN
fuelectenerg-7534	390	31	shunt	shunt	VERB
fuelectenerg-7534	390	32	connection	connection	NOUN
fuelectenerg-7534	390	33	to	to	PART
fuelectenerg-7534	390	34	ground	ground	VERB
fuelectenerg-7534	390	35	,	,	PUNCT
fuelectenerg-7534	390	36	the	the	DET
fuelectenerg-7534	390	37	other	other	ADJ
fuelectenerg-7534	390	38	allows	allow	VERB
fuelectenerg-7534	390	39	to	to	PART
fuelectenerg-7534	390	40	bypass	bypass	VERB
fuelectenerg-7534	390	41	the	the	DET
fuelectenerg-7534	390	42	two	two	NUM
fuelectenerg-7534	390	43	series	series	NOUN
fuelectenerg-7534	390	44	resistive	resistive	NOUN
fuelectenerg-7534	390	45	loads	load	NOUN
fuelectenerg-7534	390	46	.	.	PUNCT
fuelectenerg-7534	391	1	the	the	DET
fuelectenerg-7534	391	2	proposed	propose	VERB
fuelectenerg-7534	391	3	design	design	NOUN
fuelectenerg-7534	391	4	achieves	achieve	VERB
fuelectenerg-7534	391	5	8	8	NUM
fuelectenerg-7534	391	6	different	different	ADJ
fuelectenerg-7534	391	7	states	state	NOUN
fuelectenerg-7534	391	8	with	with	ADP
fuelectenerg-7534	391	9	a	a	DET
fuelectenerg-7534	391	10	limited	limited	ADJ
fuelectenerg-7534	391	11	attenuation	attenuation	NOUN
fuelectenerg-7534	391	12	error	error	NOUN
fuelectenerg-7534	391	13	,	,	PUNCT
fuelectenerg-7534	391	14	at	at	ADP
fuelectenerg-7534	391	15	the	the	DET
fuelectenerg-7534	391	16	price	price	NOUN
fuelectenerg-7534	391	17	of	of	ADP
fuelectenerg-7534	391	18	70	70	NUM
fuelectenerg-7534	391	19	v	v	NUM
fuelectenerg-7534	391	20	actuation	actuation	NOUN
fuelectenerg-7534	391	21	.	.	PUNCT
fuelectenerg-7534	392	1	in	in	ADP
fuelectenerg-7534	392	2	a	a	DET
fuelectenerg-7534	392	3	similar	similar	ADJ
fuelectenerg-7534	392	4	way	way	NOUN
fuelectenerg-7534	392	5	,	,	PUNCT
fuelectenerg-7534	392	6	[	[	X
fuelectenerg-7534	392	7	95	95	NUM
fuelectenerg-7534	392	8	]	]	PUNCT
fuelectenerg-7534	392	9	proposes	propose	VERB
fuelectenerg-7534	392	10	a	a	DET
fuelectenerg-7534	392	11	device	device	NOUN
fuelectenerg-7534	392	12	composed	compose	VERB
fuelectenerg-7534	392	13	by	by	ADP
fuelectenerg-7534	392	14	three	three	NUM
fuelectenerg-7534	392	15	cascaded	cascade	VERB
fuelectenerg-7534	392	16	sub	sub	NOUN
fuelectenerg-7534	392	17	-	-	NOUN
fuelectenerg-7534	392	18	units	unit	NOUN
fuelectenerg-7534	392	19	of	of	ADP
fuelectenerg-7534	392	20	10	10	NUM
fuelectenerg-7534	392	21	,	,	PUNCT
fuelectenerg-7534	392	22	20	20	NUM
fuelectenerg-7534	392	23	,	,	PUNCT
fuelectenerg-7534	392	24	40	40	NUM
fuelectenerg-7534	392	25	db	db	PROPN
fuelectenerg-7534	392	26	attenuation	attenuation	NOUN
fuelectenerg-7534	392	27	.	.	PUNCT
fuelectenerg-7534	393	1	each	each	PRON
fuelectenerg-7534	393	2	sub	sub	ADJ
fuelectenerg-7534	393	3	-	-	NOUN
fuelectenerg-7534	393	4	unit	unit	NOUN
fuelectenerg-7534	393	5	comprises	comprise	VERB
fuelectenerg-7534	393	6	a	a	DET
fuelectenerg-7534	393	7	t	t	NOUN
fuelectenerg-7534	393	8	-	-	PUNCT
fuelectenerg-7534	393	9	junction	junction	NOUN
fuelectenerg-7534	393	10	power	power	NOUN
fuelectenerg-7534	393	11	splitter	splitter	NOUN
fuelectenerg-7534	393	12	,	,	PUNCT
fuelectenerg-7534	393	13	leading	lead	VERB
fuelectenerg-7534	393	14	to	to	ADP
fuelectenerg-7534	393	15	an	an	DET
fuelectenerg-7534	393	16	(	(	PUNCT
fuelectenerg-7534	393	17	a	a	NOUN
fuelectenerg-7534	393	18	)	)	PUNCT
fuelectenerg-7534	393	19	(	(	PUNCT
fuelectenerg-7534	393	20	b	b	NOUN
fuelectenerg-7534	393	21	)	)	PUNCT
fuelectenerg-7534	393	22	354	354	NUM
fuelectenerg-7534	393	23	g.	g.	NOUN
fuelectenerg-7534	393	24	tagliapietra	tagliapietra	PROPN
fuelectenerg-7534	393	25	,	,	PUNCT
fuelectenerg-7534	393	26	j.	j.	PROPN
fuelectenerg-7534	393	27	iannacci	iannacci	PROPN
fuelectenerg-7534	393	28	unloaded	unload	VERB
fuelectenerg-7534	393	29	branch	branch	NOUN
fuelectenerg-7534	393	30	or	or	CCONJ
fuelectenerg-7534	393	31	to	to	ADP
fuelectenerg-7534	393	32	a	a	DET
fuelectenerg-7534	393	33	branch	branch	NOUN
fuelectenerg-7534	393	34	loaded	load	VERB
fuelectenerg-7534	393	35	with	with	ADP
fuelectenerg-7534	393	36	π	π	PROPN
fuelectenerg-7534	393	37	-	-	PUNCT
fuelectenerg-7534	393	38	shaped	shape	VERB
fuelectenerg-7534	393	39	resistive	resistive	ADJ
fuelectenerg-7534	393	40	network	network	NOUN
fuelectenerg-7534	393	41	by	by	ADP
fuelectenerg-7534	393	42	its	its	PRON
fuelectenerg-7534	393	43	spst	spst	PROPN
fuelectenerg-7534	393	44	switch	switch	NOUN
fuelectenerg-7534	393	45	.	.	PUNCT
fuelectenerg-7534	394	1	specular	specular	PROPN
fuelectenerg-7534	394	2	spst	spst	PROPN
fuelectenerg-7534	394	3	switches	switch	NOUN
fuelectenerg-7534	394	4	and	and	CCONJ
fuelectenerg-7534	394	5	t	t	PROPN
fuelectenerg-7534	394	6	-	-	PUNCT
fuelectenerg-7534	394	7	junction	junction	NOUN
fuelectenerg-7534	394	8	complete	complete	ADJ
fuelectenerg-7534	394	9	the	the	DET
fuelectenerg-7534	394	10	sub	sub	NOUN
fuelectenerg-7534	394	11	-	-	NOUN
fuelectenerg-7534	394	12	unit	unit	NOUN
fuelectenerg-7534	394	13	.	.	PUNCT
fuelectenerg-7534	395	1	such	such	ADJ
fuelectenerg-7534	395	2	design	design	NOUN
fuelectenerg-7534	395	3	allows	allow	VERB
fuelectenerg-7534	395	4	to	to	PART
fuelectenerg-7534	395	5	reach	reach	VERB
fuelectenerg-7534	395	6	wide	wide	ADJ
fuelectenerg-7534	395	7	attenuation	attenuation	NOUN
fuelectenerg-7534	395	8	(	(	PUNCT
fuelectenerg-7534	395	9	70	70	NUM
fuelectenerg-7534	395	10	db	db	NOUN
fuelectenerg-7534	395	11	)	)	PUNCT
fuelectenerg-7534	395	12	,	,	PUNCT
fuelectenerg-7534	395	13	with	with	ADP
fuelectenerg-7534	395	14	a	a	DET
fuelectenerg-7534	395	15	reduced	reduce	VERB
fuelectenerg-7534	395	16	pull	pull	NOUN
fuelectenerg-7534	395	17	-	-	PUNCT
fuelectenerg-7534	395	18	in	in	ADP
fuelectenerg-7534	395	19	voltage	voltage	NOUN
fuelectenerg-7534	395	20	(	(	PUNCT
fuelectenerg-7534	395	21	30	30	NUM
fuelectenerg-7534	395	22	v	v	NOUN
fuelectenerg-7534	395	23	)	)	PUNCT
fuelectenerg-7534	395	24	and	and	CCONJ
fuelectenerg-7534	395	25	footprint	footprint	NOUN
fuelectenerg-7534	395	26	(	(	PUNCT
fuelectenerg-7534	395	27	2.45x4.34	2.45x4.34	PROPN
fuelectenerg-7534	395	28	mm2	mm2	NUM
fuelectenerg-7534	395	29	)	)	PUNCT
fuelectenerg-7534	395	30	.	.	PUNCT
fuelectenerg-7534	396	1	previous	previous	ADJ
fuelectenerg-7534	396	2	research	research	NOUN
fuelectenerg-7534	396	3	items	item	NOUN
fuelectenerg-7534	396	4	are	be	AUX
fuelectenerg-7534	396	5	generally	generally	ADV
fuelectenerg-7534	396	6	demonstrated	demonstrate	VERB
fuelectenerg-7534	396	7	over	over	ADP
fuelectenerg-7534	396	8	a	a	DET
fuelectenerg-7534	396	9	limited	limited	ADJ
fuelectenerg-7534	396	10	range	range	NOUN
fuelectenerg-7534	396	11	of	of	ADP
fuelectenerg-7534	396	12	frequencies	frequency	NOUN
fuelectenerg-7534	396	13	,	,	PUNCT
fuelectenerg-7534	396	14	with	with	ADP
fuelectenerg-7534	396	15	a	a	DET
fuelectenerg-7534	396	16	limited	limited	ADJ
fuelectenerg-7534	396	17	number	number	NOUN
fuelectenerg-7534	396	18	of	of	ADP
fuelectenerg-7534	396	19	possible	possible	ADJ
fuelectenerg-7534	396	20	states	state	NOUN
fuelectenerg-7534	396	21	(	(	PUNCT
fuelectenerg-7534	396	22	except	except	SCONJ
fuelectenerg-7534	396	23	[	[	X
fuelectenerg-7534	396	24	93][94	93][94	NOUN
fuelectenerg-7534	396	25	]	]	X
fuelectenerg-7534	396	26	)	)	PUNCT
fuelectenerg-7534	396	27	.	.	PUNCT
fuelectenerg-7534	397	1	the	the	DET
fuelectenerg-7534	397	2	first	first	ADJ
fuelectenerg-7534	397	3	offer	offer	NOUN
fuelectenerg-7534	397	4	for	for	ADP
fuelectenerg-7534	397	5	an	an	DET
fuelectenerg-7534	397	6	attenuator	attenuator	NOUN
fuelectenerg-7534	397	7	covering	cover	VERB
fuelectenerg-7534	397	8	a	a	DET
fuelectenerg-7534	397	9	wider	wide	ADJ
fuelectenerg-7534	397	10	spectrum	spectrum	NOUN
fuelectenerg-7534	397	11	came	come	VERB
fuelectenerg-7534	397	12	with	with	ADP
fuelectenerg-7534	397	13	[	[	X
fuelectenerg-7534	397	14	97	97	NUM
fuelectenerg-7534	397	15	]	]	PUNCT
fuelectenerg-7534	397	16	.	.	PUNCT
fuelectenerg-7534	398	1	in	in	ADP
fuelectenerg-7534	398	2	this	this	DET
fuelectenerg-7534	398	3	work	work	NOUN
fuelectenerg-7534	398	4	,	,	PUNCT
fuelectenerg-7534	398	5	a	a	DET
fuelectenerg-7534	398	6	8	8	NUM
fuelectenerg-7534	398	7	-	-	PUNCT
fuelectenerg-7534	398	8	bit	bit	NOUN
fuelectenerg-7534	398	9	device	device	NOUN
fuelectenerg-7534	398	10	is	be	AUX
fuelectenerg-7534	398	11	presented	present	VERB
fuelectenerg-7534	398	12	,	,	PUNCT
fuelectenerg-7534	398	13	measured	measure	VERB
fuelectenerg-7534	398	14	in	in	ADP
fuelectenerg-7534	398	15	the	the	DET
fuelectenerg-7534	398	16	interval	interval	NOUN
fuelectenerg-7534	398	17	(	(	PUNCT
fuelectenerg-7534	398	18	0.01	0.01	NUM
fuelectenerg-7534	398	19	-	-	PUNCT
fuelectenerg-7534	398	20	110	110	NUM
fuelectenerg-7534	398	21	)	)	PUNCT
fuelectenerg-7534	398	22	ghz	ghz	NOUN
fuelectenerg-7534	398	23	.	.	PUNCT
fuelectenerg-7534	399	1	enclosed	enclose	VERB
fuelectenerg-7534	399	2	within	within	ADP
fuelectenerg-7534	399	3	cpw	cpw	NOUN
fuelectenerg-7534	399	4	configuration	configuration	NOUN
fuelectenerg-7534	399	5	and	and	CCONJ
fuelectenerg-7534	399	6	with	with	ADP
fuelectenerg-7534	399	7	an	an	DET
fuelectenerg-7534	399	8	overall	overall	ADJ
fuelectenerg-7534	399	9	footprint	footprint	NOUN
fuelectenerg-7534	399	10	of	of	ADP
fuelectenerg-7534	399	11	3x1.95	3x1.95	NUM
fuelectenerg-7534	399	12	mm2	mm2	NOUN
fuelectenerg-7534	399	13	,	,	PUNCT
fuelectenerg-7534	399	14	the	the	DET
fuelectenerg-7534	399	15	attenuator	attenuator	NOUN
fuelectenerg-7534	399	16	is	be	AUX
fuelectenerg-7534	399	17	substantially	substantially	ADV
fuelectenerg-7534	399	18	composed	compose	VERB
fuelectenerg-7534	399	19	by	by	ADP
fuelectenerg-7534	399	20	eight	eight	NUM
fuelectenerg-7534	399	21	cascaded	cascade	VERB
fuelectenerg-7534	399	22	modules	module	NOUN
fuelectenerg-7534	399	23	of	of	ADP
fuelectenerg-7534	399	24	ohmic	ohmic	ADJ
fuelectenerg-7534	399	25	switches	switch	NOUN
fuelectenerg-7534	399	26	along	along	ADP
fuelectenerg-7534	399	27	the	the	DET
fuelectenerg-7534	399	28	main	main	ADJ
fuelectenerg-7534	399	29	rf	rf	NOUN
fuelectenerg-7534	399	30	signal	signal	NOUN
fuelectenerg-7534	399	31	line	line	NOUN
fuelectenerg-7534	399	32	,	,	PUNCT
fuelectenerg-7534	399	33	actuated	actuate	VERB
fuelectenerg-7534	399	34	by	by	ADP
fuelectenerg-7534	399	35	45	45	NUM
fuelectenerg-7534	399	36	v	v	NOUN
fuelectenerg-7534	399	37	signals	signal	NOUN
fuelectenerg-7534	399	38	.	.	PUNCT
fuelectenerg-7534	400	1	depending	depend	VERB
fuelectenerg-7534	400	2	on	on	ADP
fuelectenerg-7534	400	3	the	the	DET
fuelectenerg-7534	400	4	type	type	NOUN
fuelectenerg-7534	400	5	of	of	ADP
fuelectenerg-7534	400	6	module	module	NOUN
fuelectenerg-7534	400	7	,	,	PUNCT
fuelectenerg-7534	400	8	each	each	DET
fuelectenerg-7534	400	9	switch	switch	NOUN
fuelectenerg-7534	400	10	will	will	AUX
fuelectenerg-7534	400	11	contribute	contribute	VERB
fuelectenerg-7534	400	12	to	to	PART
fuelectenerg-7534	400	13	shorten	shorten	VERB
fuelectenerg-7534	400	14	(	(	PUNCT
fuelectenerg-7534	400	15	when	when	SCONJ
fuelectenerg-7534	400	16	actuated	actuate	VERB
fuelectenerg-7534	400	17	)	)	PUNCT
fuelectenerg-7534	400	18	the	the	DET
fuelectenerg-7534	400	19	resistor	resistor	NOUN
fuelectenerg-7534	400	20	in	in	ADP
fuelectenerg-7534	400	21	series	series	NOUN
fuelectenerg-7534	400	22	on	on	ADP
fuelectenerg-7534	400	23	the	the	DET
fuelectenerg-7534	400	24	signal	signal	ADJ
fuelectenerg-7534	400	25	line	line	NOUN
fuelectenerg-7534	400	26	or	or	CCONJ
fuelectenerg-7534	400	27	to	to	PART
fuelectenerg-7534	400	28	connect	connect	VERB
fuelectenerg-7534	400	29	(	(	PUNCT
fuelectenerg-7534	400	30	when	when	SCONJ
fuelectenerg-7534	400	31	actuated	actuate	VERB
fuelectenerg-7534	400	32	)	)	PUNCT
fuelectenerg-7534	400	33	signal	signal	NOUN
fuelectenerg-7534	400	34	line	line	NOUN
fuelectenerg-7534	400	35	to	to	ADP
fuelectenerg-7534	400	36	a	a	DET
fuelectenerg-7534	400	37	shunt	shunt	NOUN
fuelectenerg-7534	400	38	resistor	resistor	NOUN
fuelectenerg-7534	400	39	to	to	PART
fuelectenerg-7534	400	40	ground	ground	VERB
fuelectenerg-7534	400	41	.	.	PUNCT
fuelectenerg-7534	401	1	the	the	DET
fuelectenerg-7534	401	2	latter	latter	ADJ
fuelectenerg-7534	401	3	module	module	NOUN
fuelectenerg-7534	401	4	thus	thus	ADV
fuelectenerg-7534	401	5	may	may	AUX
fuelectenerg-7534	401	6	operate	operate	VERB
fuelectenerg-7534	401	7	or	or	CCONJ
fuelectenerg-7534	401	8	avoid	avoid	VERB
fuelectenerg-7534	401	9	shunt	shunt	ADJ
fuelectenerg-7534	401	10	resistive	resistive	ADJ
fuelectenerg-7534	401	11	path	path	NOUN
fuelectenerg-7534	401	12	to	to	PART
fuelectenerg-7534	401	13	ground	ground	VERB
fuelectenerg-7534	401	14	,	,	PUNCT
fuelectenerg-7534	401	15	while	while	SCONJ
fuelectenerg-7534	401	16	the	the	DET
fuelectenerg-7534	401	17	former	former	ADJ
fuelectenerg-7534	401	18	module	module	NOUN
fuelectenerg-7534	401	19	may	may	AUX
fuelectenerg-7534	401	20	shorten	shorten	VERB
fuelectenerg-7534	401	21	the	the	DET
fuelectenerg-7534	401	22	series	series	NOUN
fuelectenerg-7534	401	23	resistor	resistor	NOUN
fuelectenerg-7534	401	24	,	,	PUNCT
fuelectenerg-7534	401	25	and	and	CCONJ
fuelectenerg-7534	401	26	so	so	ADV
fuelectenerg-7534	401	27	on	on	ADV
fuelectenerg-7534	401	28	,	,	PUNCT
fuelectenerg-7534	401	29	alternately	alternately	ADV
fuelectenerg-7534	401	30	.	.	PUNCT
fuelectenerg-7534	402	1	such	such	ADJ
fuelectenerg-7534	402	2	asymmetric	asymmetric	ADJ
fuelectenerg-7534	402	3	network	network	NOUN
fuelectenerg-7534	402	4	is	be	AUX
fuelectenerg-7534	402	5	measured	measure	VERB
fuelectenerg-7534	402	6	under	under	ADP
fuelectenerg-7534	402	7	a	a	DET
fuelectenerg-7534	402	8	wide	wide	ADJ
fuelectenerg-7534	402	9	variety	variety	NOUN
fuelectenerg-7534	402	10	of	of	ADP
fuelectenerg-7534	402	11	configurations	configuration	NOUN
fuelectenerg-7534	402	12	,	,	PUNCT
fuelectenerg-7534	402	13	considering	consider	VERB
fuelectenerg-7534	402	14	vwsr	vwsr	ADV
fuelectenerg-7534	402	15	(	(	PUNCT
fuelectenerg-7534	402	16	voltage	voltage	NOUN
fuelectenerg-7534	402	17	wave	wave	NOUN
fuelectenerg-7534	402	18	standing	stand	VERB
fuelectenerg-7534	402	19	ratio	ratio	NOUN
fuelectenerg-7534	402	20	)	)	PUNCT
fuelectenerg-7534	402	21	,	,	PUNCT
fuelectenerg-7534	402	22	insertion	insertion	NOUN
fuelectenerg-7534	402	23	and	and	CCONJ
fuelectenerg-7534	402	24	return	return	VERB
fuelectenerg-7534	402	25	loss	loss	NOUN
fuelectenerg-7534	402	26	,	,	PUNCT
fuelectenerg-7534	402	27	and	and	CCONJ
fuelectenerg-7534	402	28	identifying	identify	VERB
fuelectenerg-7534	402	29	the	the	DET
fuelectenerg-7534	402	30	most	most	ADV
fuelectenerg-7534	402	31	advisable	advisable	ADJ
fuelectenerg-7534	402	32	configurations	configuration	NOUN
fuelectenerg-7534	402	33	and	and	CCONJ
fuelectenerg-7534	402	34	causes	cause	NOUN
fuelectenerg-7534	402	35	of	of	ADP
fuelectenerg-7534	402	36	the	the	DET
fuelectenerg-7534	402	37	unadvisable	unadvisable	ADJ
fuelectenerg-7534	402	38	ones	one	NOUN
fuelectenerg-7534	402	39	.	.	PUNCT
fuelectenerg-7534	403	1	the	the	DET
fuelectenerg-7534	403	2	first	first	ADJ
fuelectenerg-7534	403	3	proposals	proposal	NOUN
fuelectenerg-7534	403	4	of	of	ADP
fuelectenerg-7534	403	5	analog	analog	NOUN
fuelectenerg-7534	403	6	attenuators	attenuator	NOUN
fuelectenerg-7534	403	7	came	come	VERB
fuelectenerg-7534	403	8	only	only	ADV
fuelectenerg-7534	403	9	during	during	ADP
fuelectenerg-7534	403	10	the	the	DET
fuelectenerg-7534	403	11	last	last	ADJ
fuelectenerg-7534	403	12	couple	couple	NOUN
fuelectenerg-7534	403	13	of	of	ADP
fuelectenerg-7534	403	14	years	year	NOUN
fuelectenerg-7534	403	15	.	.	PUNCT
fuelectenerg-7534	404	1	in	in	ADP
fuelectenerg-7534	404	2	[	[	X
fuelectenerg-7534	404	3	98	98	NUM
fuelectenerg-7534	404	4	]	]	PUNCT
fuelectenerg-7534	404	5	,	,	PUNCT
fuelectenerg-7534	404	6	authors	author	NOUN
fuelectenerg-7534	404	7	present	present	VERB
fuelectenerg-7534	404	8	a	a	DET
fuelectenerg-7534	404	9	design	design	NOUN
fuelectenerg-7534	404	10	based	base	VERB
fuelectenerg-7534	404	11	on	on	ADP
fuelectenerg-7534	404	12	cpw	cpw	NOUN
fuelectenerg-7534	404	13	meandered	meander	VERB
fuelectenerg-7534	404	14	configuration	configuration	NOUN
fuelectenerg-7534	404	15	.	.	PUNCT
fuelectenerg-7534	405	1	a	a	DET
fuelectenerg-7534	405	2	membrane	membrane	NOUN
fuelectenerg-7534	405	3	with	with	ADP
fuelectenerg-7534	405	4	lowresistivity	lowresistivity	NOUN
fuelectenerg-7534	405	5	silicon	silicon	NOUN
fuelectenerg-7534	405	6	slab	slab	NOUN
fuelectenerg-7534	405	7	is	be	AUX
fuelectenerg-7534	405	8	deployed	deploy	VERB
fuelectenerg-7534	405	9	over	over	ADP
fuelectenerg-7534	405	10	the	the	DET
fuelectenerg-7534	405	11	signal	signal	ADJ
fuelectenerg-7534	405	12	line	line	NOUN
fuelectenerg-7534	405	13	,	,	PUNCT
fuelectenerg-7534	405	14	with	with	ADP
fuelectenerg-7534	405	15	a	a	DET
fuelectenerg-7534	405	16	highly	highly	ADV
fuelectenerg-7534	405	17	magnetized	magnetized	ADJ
fuelectenerg-7534	405	18	permanent	permanent	ADJ
fuelectenerg-7534	405	19	magnet	magnet	NOUN
fuelectenerg-7534	405	20	on	on	ADP
fuelectenerg-7534	405	21	the	the	DET
fuelectenerg-7534	405	22	upper	upper	ADJ
fuelectenerg-7534	405	23	side	side	NOUN
fuelectenerg-7534	405	24	facing	face	VERB
fuelectenerg-7534	405	25	an	an	DET
fuelectenerg-7534	405	26	overhead	overhead	ADJ
fuelectenerg-7534	405	27	planar	planar	ADJ
fuelectenerg-7534	405	28	spiral	spiral	ADJ
fuelectenerg-7534	405	29	coil	coil	NOUN
fuelectenerg-7534	405	30	.	.	PUNCT
fuelectenerg-7534	406	1	the	the	DET
fuelectenerg-7534	406	2	direction	direction	NOUN
fuelectenerg-7534	406	3	of	of	ADP
fuelectenerg-7534	406	4	the	the	DET
fuelectenerg-7534	406	5	current	current	ADJ
fuelectenerg-7534	406	6	determines	determine	VERB
fuelectenerg-7534	406	7	the	the	DET
fuelectenerg-7534	406	8	attraction	attraction	NOUN
fuelectenerg-7534	406	9	(	(	PUNCT
fuelectenerg-7534	406	10	or	or	CCONJ
fuelectenerg-7534	406	11	repulsion	repulsion	NOUN
fuelectenerg-7534	406	12	)	)	PUNCT
fuelectenerg-7534	406	13	of	of	ADP
fuelectenerg-7534	406	14	the	the	DET
fuelectenerg-7534	406	15	underlying	underlying	ADJ
fuelectenerg-7534	406	16	magnet	magnet	NOUN
fuelectenerg-7534	406	17	and	and	CCONJ
fuelectenerg-7534	406	18	membrane	membrane	NOUN
fuelectenerg-7534	406	19	,	,	PUNCT
fuelectenerg-7534	406	20	while	while	SCONJ
fuelectenerg-7534	406	21	the	the	DET
fuelectenerg-7534	406	22	amount	amount	NOUN
fuelectenerg-7534	406	23	of	of	ADP
fuelectenerg-7534	406	24	current	current	ADJ
fuelectenerg-7534	406	25	determines	determine	NOUN
fuelectenerg-7534	406	26	the	the	DET
fuelectenerg-7534	406	27	variation	variation	NOUN
fuelectenerg-7534	406	28	of	of	ADP
fuelectenerg-7534	406	29	the	the	DET
fuelectenerg-7534	406	30	gap	gap	NOUN
fuelectenerg-7534	406	31	between	between	ADP
fuelectenerg-7534	406	32	the	the	DET
fuelectenerg-7534	406	33	slab	slab	NOUN
fuelectenerg-7534	406	34	and	and	CCONJ
fuelectenerg-7534	406	35	the	the	DET
fuelectenerg-7534	406	36	signal	signal	ADJ
fuelectenerg-7534	406	37	line	line	NOUN
fuelectenerg-7534	406	38	and	and	CCONJ
fuelectenerg-7534	406	39	,	,	PUNCT
fuelectenerg-7534	406	40	in	in	ADP
fuelectenerg-7534	406	41	turn	turn	NOUN
fuelectenerg-7534	406	42	,	,	PUNCT
fuelectenerg-7534	406	43	the	the	DET
fuelectenerg-7534	406	44	quantity	quantity	NOUN
fuelectenerg-7534	406	45	of	of	ADP
fuelectenerg-7534	406	46	signal	signal	ADJ
fuelectenerg-7534	406	47	power	power	NOUN
fuelectenerg-7534	406	48	absorbed	absorb	VERB
fuelectenerg-7534	406	49	by	by	ADP
fuelectenerg-7534	406	50	the	the	DET
fuelectenerg-7534	406	51	silicon	silicon	NOUN
fuelectenerg-7534	406	52	slab	slab	NOUN
fuelectenerg-7534	406	53	.	.	PUNCT
fuelectenerg-7534	407	1	this	this	DET
fuelectenerg-7534	407	2	2x5	2x5	NUM
fuelectenerg-7534	407	3	mm2	mm2	NOUN
fuelectenerg-7534	407	4	device	device	NOUN
fuelectenerg-7534	407	5	exhibits	exhibit	VERB
fuelectenerg-7534	407	6	low	low	ADJ
fuelectenerg-7534	407	7	insertion	insertion	NOUN
fuelectenerg-7534	407	8	loss	loss	NOUN
fuelectenerg-7534	407	9	,	,	PUNCT
fuelectenerg-7534	407	10	for	for	ADP
fuelectenerg-7534	407	11	an	an	DET
fuelectenerg-7534	407	12	attenuation	attenuation	NOUN
fuelectenerg-7534	407	13	range	range	NOUN
fuelectenerg-7534	407	14	of	of	ADP
fuelectenerg-7534	407	15	16.4	16.4	NUM
fuelectenerg-7534	407	16	db	db	NOUN
fuelectenerg-7534	407	17	.	.	PUNCT
fuelectenerg-7534	408	1	a	a	DET
fuelectenerg-7534	408	2	radically	radically	ADV
fuelectenerg-7534	408	3	different	different	ADJ
fuelectenerg-7534	408	4	design	design	NOUN
fuelectenerg-7534	408	5	is	be	AUX
fuelectenerg-7534	408	6	proposed	propose	VERB
fuelectenerg-7534	408	7	in	in	ADP
fuelectenerg-7534	408	8	[	[	X
fuelectenerg-7534	408	9	99	99	NUM
fuelectenerg-7534	408	10	]	]	PUNCT
fuelectenerg-7534	408	11	.	.	PUNCT
fuelectenerg-7534	409	1	this	this	DET
fuelectenerg-7534	409	2	work	work	NOUN
fuelectenerg-7534	409	3	is	be	AUX
fuelectenerg-7534	409	4	substantially	substantially	ADV
fuelectenerg-7534	409	5	based	base	VERB
fuelectenerg-7534	409	6	on	on	ADP
fuelectenerg-7534	409	7	two	two	NUM
fuelectenerg-7534	409	8	quadrature	quadrature	NOUN
fuelectenerg-7534	409	9	hybrid	hybrid	NOUN
fuelectenerg-7534	409	10	coupler	coupler	NOUN
fuelectenerg-7534	409	11	and	and	CCONJ
fuelectenerg-7534	409	12	two	two	NUM
fuelectenerg-7534	409	13	varactors	varactor	NOUN
fuelectenerg-7534	409	14	.	.	PUNCT
fuelectenerg-7534	410	1	while	while	SCONJ
fuelectenerg-7534	410	2	“	"	PUNCT
fuelectenerg-7534	410	3	isolated	isolate	VERB
fuelectenerg-7534	410	4	”	"	PUNCT
fuelectenerg-7534	410	5	ports	port	NOUN
fuelectenerg-7534	410	6	of	of	ADP
fuelectenerg-7534	410	7	the	the	DET
fuelectenerg-7534	410	8	couplers	coupler	NOUN
fuelectenerg-7534	410	9	are	be	AUX
fuelectenerg-7534	410	10	terminated	terminate	VERB
fuelectenerg-7534	410	11	with	with	ADP
fuelectenerg-7534	410	12	a	a	DET
fuelectenerg-7534	410	13	matched	match	VERB
fuelectenerg-7534	410	14	load	load	NOUN
fuelectenerg-7534	410	15	,	,	PUNCT
fuelectenerg-7534	410	16	the	the	DET
fuelectenerg-7534	410	17	corresponding	corresponding	ADJ
fuelectenerg-7534	410	18	“	"	PUNCT
fuelectenerg-7534	410	19	through	through	ADP
fuelectenerg-7534	410	20	”	"	PUNCT
fuelectenerg-7534	410	21	and	and	CCONJ
fuelectenerg-7534	410	22	“	"	PUNCT
fuelectenerg-7534	410	23	coupled	couple	VERB
fuelectenerg-7534	410	24	”	"	PUNCT
fuelectenerg-7534	410	25	ports	port	NOUN
fuelectenerg-7534	410	26	of	of	ADP
fuelectenerg-7534	410	27	couplers	coupler	NOUN
fuelectenerg-7534	410	28	are	be	AUX
fuelectenerg-7534	410	29	connected	connect	VERB
fuelectenerg-7534	410	30	by	by	ADP
fuelectenerg-7534	410	31	separate	separate	ADJ
fuelectenerg-7534	410	32	rf	rf	ADJ
fuelectenerg-7534	410	33	lines	line	NOUN
fuelectenerg-7534	410	34	,	,	PUNCT
fuelectenerg-7534	410	35	each	each	PRON
fuelectenerg-7534	410	36	loaded	load	VERB
fuelectenerg-7534	410	37	with	with	ADP
fuelectenerg-7534	410	38	a	a	DET
fuelectenerg-7534	410	39	shunt	shunt	NOUN
fuelectenerg-7534	410	40	varactor	varactor	NOUN
fuelectenerg-7534	410	41	.	.	PUNCT
fuelectenerg-7534	411	1	the	the	DET
fuelectenerg-7534	411	2	plates	plate	NOUN
fuelectenerg-7534	411	3	of	of	ADP
fuelectenerg-7534	411	4	a	a	DET
fuelectenerg-7534	411	5	varactor	varactor	NOUN
fuelectenerg-7534	411	6	are	be	AUX
fuelectenerg-7534	411	7	on	on	ADP
fuelectenerg-7534	411	8	the	the	DET
fuelectenerg-7534	411	9	two	two	NUM
fuelectenerg-7534	411	10	sides	side	NOUN
fuelectenerg-7534	411	11	of	of	ADP
fuelectenerg-7534	411	12	the	the	DET
fuelectenerg-7534	411	13	rf	rf	ADJ
fuelectenerg-7534	411	14	line	line	NOUN
fuelectenerg-7534	411	15	and	and	CCONJ
fuelectenerg-7534	411	16	are	be	AUX
fuelectenerg-7534	411	17	moved	move	VERB
fuelectenerg-7534	411	18	by	by	ADP
fuelectenerg-7534	411	19	an	an	DET
fuelectenerg-7534	411	20	electrothermal	electrothermal	ADJ
fuelectenerg-7534	411	21	chevron	chevron	NOUN
fuelectenerg-7534	411	22	-	-	PUNCT
fuelectenerg-7534	411	23	type	type	NOUN
fuelectenerg-7534	411	24	actuator	actuator	NOUN
fuelectenerg-7534	411	25	,	,	PUNCT
fuelectenerg-7534	411	26	driven	drive	VERB
fuelectenerg-7534	411	27	by	by	ADP
fuelectenerg-7534	411	28	a	a	DET
fuelectenerg-7534	411	29	control	control	NOUN
fuelectenerg-7534	411	30	signal	signal	NOUN
fuelectenerg-7534	411	31	with	with	ADP
fuelectenerg-7534	411	32	maximum	maximum	ADJ
fuelectenerg-7534	411	33	value	value	NOUN
fuelectenerg-7534	411	34	of	of	ADP
fuelectenerg-7534	411	35	9.8	9.8	NUM
fuelectenerg-7534	411	36	v.	v.	CCONJ
fuelectenerg-7534	411	37	beside	beside	ADP
fuelectenerg-7534	411	38	actuation	actuation	NOUN
fuelectenerg-7534	411	39	voltage	voltage	NOUN
fuelectenerg-7534	411	40	,	,	PUNCT
fuelectenerg-7534	411	41	the	the	DET
fuelectenerg-7534	411	42	area	area	NOUN
fuelectenerg-7534	411	43	of	of	ADP
fuelectenerg-7534	411	44	the	the	DET
fuelectenerg-7534	411	45	device	device	NOUN
fuelectenerg-7534	411	46	is	be	AUX
fuelectenerg-7534	411	47	moderate	moderate	ADJ
fuelectenerg-7534	411	48	(	(	PUNCT
fuelectenerg-7534	411	49	3.8x3.1	3.8x3.1	ADJ
fuelectenerg-7534	411	50	mm2	mm2	NOUN
fuelectenerg-7534	411	51	)	)	PUNCT
fuelectenerg-7534	411	52	,	,	PUNCT
fuelectenerg-7534	411	53	as	as	ADV
fuelectenerg-7534	411	54	well	well	ADV
fuelectenerg-7534	411	55	.	.	PUNCT
fuelectenerg-7534	412	1	despite	despite	SCONJ
fuelectenerg-7534	412	2	the	the	DET
fuelectenerg-7534	412	3	limited	limited	ADJ
fuelectenerg-7534	412	4	attenuation	attenuation	NOUN
fuelectenerg-7534	412	5	and	and	CCONJ
fuelectenerg-7534	412	6	frequency	frequency	NOUN
fuelectenerg-7534	412	7	range	range	NOUN
fuelectenerg-7534	412	8	,	,	PUNCT
fuelectenerg-7534	412	9	the	the	DET
fuelectenerg-7534	412	10	previous	previous	ADJ
fuelectenerg-7534	412	11	two	two	NUM
fuelectenerg-7534	412	12	proposals	proposal	NOUN
fuelectenerg-7534	412	13	represent	represent	VERB
fuelectenerg-7534	412	14	remarkable	remarkable	ADJ
fuelectenerg-7534	412	15	steps	step	NOUN
fuelectenerg-7534	412	16	ahead	ahead	ADV
fuelectenerg-7534	412	17	in	in	ADP
fuelectenerg-7534	412	18	the	the	DET
fuelectenerg-7534	412	19	direction	direction	NOUN
fuelectenerg-7534	412	20	of	of	ADP
fuelectenerg-7534	412	21	further	further	ADJ
fuelectenerg-7534	412	22	low	low	ADJ
fuelectenerg-7534	412	23	-	-	PUNCT
fuelectenerg-7534	412	24	cost	cost	NOUN
fuelectenerg-7534	412	25	and	and	CCONJ
fuelectenerg-7534	412	26	low	low	ADJ
fuelectenerg-7534	412	27	-	-	PUNCT
fuelectenerg-7534	412	28	power	power	NOUN
fuelectenerg-7534	412	29	reliable	reliable	ADJ
fuelectenerg-7534	412	30	rf	rf	NOUN
fuelectenerg-7534	412	31	-	-	PUNCT
fuelectenerg-7534	412	32	mems	mems	ADJ
fuelectenerg-7534	412	33	attenuators	attenuator	NOUN
fuelectenerg-7534	412	34	.	.	PUNCT
fuelectenerg-7534	413	1	table	table	NOUN
fuelectenerg-7534	413	2	6	6	NUM
fuelectenerg-7534	413	3	comparison	comparison	NOUN
fuelectenerg-7534	413	4	between	between	ADP
fuelectenerg-7534	413	5	the	the	DET
fuelectenerg-7534	413	6	different	different	ADJ
fuelectenerg-7534	413	7	discussed	discuss	VERB
fuelectenerg-7534	413	8	realizations	realization	NOUN
fuelectenerg-7534	413	9	of	of	ADP
fuelectenerg-7534	413	10	attenuators	attenuator	NOUN
fuelectenerg-7534	413	11	.	.	PUNCT
fuelectenerg-7534	414	1	work	work	NOUN
fuelectenerg-7534	414	2	range	range	NOUN
fuelectenerg-7534	414	3	(	(	PUNCT
fuelectenerg-7534	414	4	ghz	ghz	NOUN
fuelectenerg-7534	414	5	)	)	PUNCT
fuelectenerg-7534	414	6	measured	measure	VERB
fuelectenerg-7534	414	7	@(ghz	@(ghz	PROPN
fuelectenerg-7534	414	8	)	)	PUNCT
fuelectenerg-7534	414	9	ret	ret	PROPN
fuelectenerg-7534	414	10	.	.	PUNCT
fuelectenerg-7534	415	1	loss	loss	PROPN
fuelectenerg-7534	415	2	(	(	PUNCT
fuelectenerg-7534	415	3	db	db	NOUN
fuelectenerg-7534	415	4	)	)	PUNCT
fuelectenerg-7534	415	5	ins	in	NOUN
fuelectenerg-7534	415	6	.	.	PUNCT
fuelectenerg-7534	416	1	loss	loss	NOUN
fuelectenerg-7534	416	2	(	(	PUNCT
fuelectenerg-7534	416	3	db	db	PROPN
fuelectenerg-7534	416	4	)	)	PUNCT
fuelectenerg-7534	416	5	max	max	PROPN
fuelectenerg-7534	416	6	att	att	PROPN
fuelectenerg-7534	416	7	.	.	PUNCT
fuelectenerg-7534	417	1	(	(	PUNCT
fuelectenerg-7534	417	2	db	db	NOUN
fuelectenerg-7534	417	3	)	)	PUNCT
fuelectenerg-7534	417	4	step	step	NOUN
fuelectenerg-7534	417	5	(	(	PUNCT
fuelectenerg-7534	417	6	db	db	NOUN
fuelectenerg-7534	417	7	)	)	PUNCT
fuelectenerg-7534	417	8	error	error	NOUN
fuelectenerg-7534	417	9	(	(	PUNCT
fuelectenerg-7534	417	10	db	db	NOUN
fuelectenerg-7534	417	11	)	)	PUNCT
fuelectenerg-7534	418	1	[	[	X
fuelectenerg-7534	418	2	93	93	NUM
fuelectenerg-7534	418	3	]	]	SYM
fuelectenerg-7534	418	4	0.05	0.05	NUM
fuelectenerg-7534	418	5	-	-	SYM
fuelectenerg-7534	418	6	13	13	NUM
fuelectenerg-7534	418	7	8	8	NUM
fuelectenerg-7534	418	8	15	15	NUM
fuelectenerg-7534	418	9	1.8	1.8	NUM
fuelectenerg-7534	418	10	19.7	19.7	NUM
fuelectenerg-7534	418	11	[	[	X
fuelectenerg-7534	418	12	94	94	NUM
fuelectenerg-7534	418	13	]	]	SYM
fuelectenerg-7534	418	14	0.1	0.1	NUM
fuelectenerg-7534	418	15	-	-	SYM
fuelectenerg-7534	418	16	40	40	NUM
fuelectenerg-7534	418	17	20	20	NUM
fuelectenerg-7534	418	18	2.5	2.5	NUM
fuelectenerg-7534	418	19	38.5	38.5	NUM
fuelectenerg-7534	419	1	[	[	X
fuelectenerg-7534	419	2	95	95	NUM
fuelectenerg-7534	419	3	]	]	SYM
fuelectenerg-7534	419	4	0.1	0.1	NUM
fuelectenerg-7534	419	5	-	-	SYM
fuelectenerg-7534	419	6	20	20	NUM
fuelectenerg-7534	419	7	0.1	0.1	NUM
fuelectenerg-7534	419	8	-	-	SYM
fuelectenerg-7534	419	9	20	20	NUM
fuelectenerg-7534	419	10	11.9	11.9	NUM
fuelectenerg-7534	419	11	0.73	0.73	NUM
fuelectenerg-7534	419	12	70	70	NUM
fuelectenerg-7534	419	13	10	10	NUM
fuelectenerg-7534	419	14	<3	<3	NOUN
fuelectenerg-7534	419	15	%	%	NOUN
fuelectenerg-7534	420	1	[	[	X
fuelectenerg-7534	420	2	96	96	NUM
fuelectenerg-7534	420	3	]	]	SYM
fuelectenerg-7534	420	4	0	0	NUM
fuelectenerg-7534	420	5	-	-	SYM
fuelectenerg-7534	420	6	20	20	NUM
fuelectenerg-7534	420	7	0	0	NUM
fuelectenerg-7534	420	8	-	-	SYM
fuelectenerg-7534	420	9	20	20	NUM
fuelectenerg-7534	420	10	12	12	NUM
fuelectenerg-7534	420	11	2	2	NUM
fuelectenerg-7534	420	12	35	35	NUM
fuelectenerg-7534	420	13	5	5	NUM
fuelectenerg-7534	420	14	<	<	NOUN
fuelectenerg-7534	420	15	5	5	NUM
fuelectenerg-7534	420	16	%	%	NOUN
fuelectenerg-7534	420	17	[	[	X
fuelectenerg-7534	420	18	97	97	NUM
fuelectenerg-7534	420	19	]	]	SYM
fuelectenerg-7534	420	20	0.01	0.01	NUM
fuelectenerg-7534	420	21	-	-	SYM
fuelectenerg-7534	420	22	110	110	NUM
fuelectenerg-7534	420	23	20	20	NUM
fuelectenerg-7534	420	24	5	5	NUM
fuelectenerg-7534	420	25	45	45	NUM
fuelectenerg-7534	421	1	[	[	X
fuelectenerg-7534	421	2	98	98	NUM
fuelectenerg-7534	421	3	]	]	SYM
fuelectenerg-7534	421	4	21.5	21.5	NUM
fuelectenerg-7534	421	5	-	-	SYM
fuelectenerg-7534	421	6	26.5	26.5	NUM
fuelectenerg-7534	421	7	23.5	23.5	NUM
fuelectenerg-7534	421	8	18	18	NUM
fuelectenerg-7534	421	9	1.2	1.2	NUM
fuelectenerg-7534	421	10	17.6	17.6	NUM
fuelectenerg-7534	421	11	<	<	NOUN
fuelectenerg-7534	421	12	0.2	0.2	NUM
fuelectenerg-7534	421	13	%	%	NOUN
fuelectenerg-7534	422	1	[	[	X
fuelectenerg-7534	422	2	99	99	NUM
fuelectenerg-7534	422	3	]	]	SYM
fuelectenerg-7534	422	4	58	58	NUM
fuelectenerg-7534	422	5	-	-	SYM
fuelectenerg-7534	422	6	62	62	NUM
fuelectenerg-7534	422	7	60	60	NUM
fuelectenerg-7534	422	8	20	20	NUM
fuelectenerg-7534	422	9	10	10	NUM
fuelectenerg-7534	422	10	25	25	NUM
fuelectenerg-7534	422	11	a	a	DET
fuelectenerg-7534	422	12	comprehensive	comprehensive	ADJ
fuelectenerg-7534	422	13	overview	overview	NOUN
fuelectenerg-7534	422	14	of	of	ADP
fuelectenerg-7534	422	15	recent	recent	ADJ
fuelectenerg-7534	422	16	developments	development	NOUN
fuelectenerg-7534	422	17	in	in	ADP
fuelectenerg-7534	422	18	rf	rf	ADJ
fuelectenerg-7534	422	19	-	-	PUNCT
fuelectenerg-7534	422	20	mems	mems	ADJ
fuelectenerg-7534	422	21	technology	technology	NOUN
fuelectenerg-7534	422	22	355	355	NUM
fuelectenerg-7534	422	23	6	6	NUM
fuelectenerg-7534	422	24	.	.	PUNCT
fuelectenerg-7534	423	1	filters	filter	NOUN
fuelectenerg-7534	423	2	filters	filter	NOUN
fuelectenerg-7534	423	3	play	play	VERB
fuelectenerg-7534	423	4	a	a	DET
fuelectenerg-7534	423	5	crucial	crucial	ADJ
fuelectenerg-7534	423	6	role	role	NOUN
fuelectenerg-7534	423	7	in	in	ADP
fuelectenerg-7534	423	8	every	every	DET
fuelectenerg-7534	423	9	rf	rf	ADJ
fuelectenerg-7534	423	10	front	front	ADJ
fuelectenerg-7534	423	11	-	-	PUNCT
fuelectenerg-7534	423	12	end	end	NOUN
fuelectenerg-7534	423	13	,	,	PUNCT
fuelectenerg-7534	423	14	enabling	enable	VERB
fuelectenerg-7534	423	15	a	a	DET
fuelectenerg-7534	423	16	suitable	suitable	ADJ
fuelectenerg-7534	423	17	signal	signal	NOUN
fuelectenerg-7534	423	18	-	-	PUNCT
fuelectenerg-7534	423	19	to	to	ADP
fuelectenerg-7534	423	20	-	-	PUNCT
fuelectenerg-7534	423	21	noise	noise	NOUN
fuelectenerg-7534	423	22	ratio	ratio	NOUN
fuelectenerg-7534	423	23	for	for	ADP
fuelectenerg-7534	423	24	the	the	DET
fuelectenerg-7534	423	25	desired	desire	VERB
fuelectenerg-7534	423	26	signal	signal	NOUN
fuelectenerg-7534	423	27	contributions	contribution	NOUN
fuelectenerg-7534	423	28	and	and	CCONJ
fuelectenerg-7534	423	29	rejecting	reject	VERB
fuelectenerg-7534	423	30	the	the	DET
fuelectenerg-7534	423	31	out	out	ADJ
fuelectenerg-7534	423	32	-	-	PUNCT
fuelectenerg-7534	423	33	of	of	ADP
fuelectenerg-7534	423	34	-	-	PUNCT
fuelectenerg-7534	423	35	band	band	NOUN
fuelectenerg-7534	423	36	noise	noise	NOUN
fuelectenerg-7534	423	37	within	within	ADP
fuelectenerg-7534	423	38	the	the	DET
fuelectenerg-7534	423	39	desired	desire	VERB
fuelectenerg-7534	423	40	frequency	frequency	NOUN
fuelectenerg-7534	423	41	bands	band	NOUN
fuelectenerg-7534	423	42	.	.	PUNCT
fuelectenerg-7534	424	1	moreover	moreover	ADV
fuelectenerg-7534	424	2	,	,	PUNCT
fuelectenerg-7534	424	3	by	by	ADP
fuelectenerg-7534	424	4	considering	consider	VERB
fuelectenerg-7534	424	5	the	the	DET
fuelectenerg-7534	424	6	growing	grow	VERB
fuelectenerg-7534	424	7	overpopulation	overpopulation	NOUN
fuelectenerg-7534	424	8	of	of	ADP
fuelectenerg-7534	424	9	the	the	DET
fuelectenerg-7534	424	10	limited	limit	VERB
fuelectenerg-7534	424	11	available	available	ADJ
fuelectenerg-7534	424	12	spectrum	spectrum	NOUN
fuelectenerg-7534	424	13	in	in	ADP
fuelectenerg-7534	424	14	recent	recent	ADJ
fuelectenerg-7534	424	15	years	year	NOUN
fuelectenerg-7534	424	16	,	,	PUNCT
fuelectenerg-7534	424	17	it	it	PRON
fuelectenerg-7534	424	18	is	be	AUX
fuelectenerg-7534	424	19	possible	possible	ADJ
fuelectenerg-7534	424	20	to	to	PART
fuelectenerg-7534	424	21	understand	understand	VERB
fuelectenerg-7534	424	22	why	why	SCONJ
fuelectenerg-7534	424	23	the	the	DET
fuelectenerg-7534	424	24	role	role	NOUN
fuelectenerg-7534	424	25	has	have	AUX
fuelectenerg-7534	424	26	gained	gain	VERB
fuelectenerg-7534	424	27	an	an	DET
fuelectenerg-7534	424	28	increasing	increase	VERB
fuelectenerg-7534	424	29	relevance	relevance	NOUN
fuelectenerg-7534	424	30	[	[	X
fuelectenerg-7534	424	31	100	100	NUM
fuelectenerg-7534	424	32	]	]	PUNCT
fuelectenerg-7534	424	33	.	.	PUNCT
fuelectenerg-7534	425	1	given	give	VERB
fuelectenerg-7534	425	2	the	the	DET
fuelectenerg-7534	425	3	additional	additional	ADJ
fuelectenerg-7534	425	4	portions	portion	NOUN
fuelectenerg-7534	425	5	of	of	ADP
fuelectenerg-7534	425	6	spectrum	spectrum	NOUN
fuelectenerg-7534	425	7	provided	provide	VERB
fuelectenerg-7534	425	8	by	by	ADP
fuelectenerg-7534	425	9	5	5	NUM
fuelectenerg-7534	425	10	g	g	NOUN
fuelectenerg-7534	425	11	paradigm	paradigm	NOUN
fuelectenerg-7534	425	12	and	and	CCONJ
fuelectenerg-7534	425	13	the	the	DET
fuelectenerg-7534	425	14	required	required	ADJ
fuelectenerg-7534	425	15	compliance	compliance	NOUN
fuelectenerg-7534	425	16	with	with	ADP
fuelectenerg-7534	425	17	different	different	ADJ
fuelectenerg-7534	425	18	communication	communication	NOUN
fuelectenerg-7534	425	19	standards	standard	NOUN
fuelectenerg-7534	425	20	,	,	PUNCT
fuelectenerg-7534	425	21	the	the	DET
fuelectenerg-7534	425	22	presence	presence	NOUN
fuelectenerg-7534	425	23	of	of	ADP
fuelectenerg-7534	425	24	agile	agile	ADJ
fuelectenerg-7534	425	25	reconfigurable	reconfigurable	ADJ
fuelectenerg-7534	425	26	filters	filter	NOUN
fuelectenerg-7534	425	27	represents	represent	VERB
fuelectenerg-7534	425	28	a	a	DET
fuelectenerg-7534	425	29	stringent	stringent	ADJ
fuelectenerg-7534	425	30	need	need	NOUN
fuelectenerg-7534	425	31	for	for	ADP
fuelectenerg-7534	425	32	radio	radio	NOUN
fuelectenerg-7534	425	33	front	front	NOUN
fuelectenerg-7534	425	34	-	-	PUNCT
fuelectenerg-7534	425	35	ends	end	NOUN
fuelectenerg-7534	425	36	of	of	ADP
fuelectenerg-7534	425	37	future	future	ADJ
fuelectenerg-7534	425	38	mobile	mobile	ADJ
fuelectenerg-7534	425	39	devices	device	NOUN
fuelectenerg-7534	425	40	[	[	X
fuelectenerg-7534	425	41	101	101	NUM
fuelectenerg-7534	425	42	]	]	PUNCT
fuelectenerg-7534	425	43	.	.	PUNCT
fuelectenerg-7534	426	1	in	in	ADP
fuelectenerg-7534	426	2	addition	addition	NOUN
fuelectenerg-7534	426	3	to	to	ADP
fuelectenerg-7534	426	4	these	these	DET
fuelectenerg-7534	426	5	technical	technical	ADJ
fuelectenerg-7534	426	6	considerations	consideration	NOUN
fuelectenerg-7534	426	7	,	,	PUNCT
fuelectenerg-7534	426	8	the	the	DET
fuelectenerg-7534	426	9	requirements	requirement	NOUN
fuelectenerg-7534	426	10	of	of	ADP
fuelectenerg-7534	426	11	the	the	DET
fuelectenerg-7534	426	12	market	market	NOUN
fuelectenerg-7534	426	13	must	must	AUX
fuelectenerg-7534	426	14	be	be	AUX
fuelectenerg-7534	426	15	taken	take	VERB
fuelectenerg-7534	426	16	into	into	ADP
fuelectenerg-7534	426	17	account	account	NOUN
fuelectenerg-7534	426	18	as	as	ADV
fuelectenerg-7534	426	19	well	well	ADV
fuelectenerg-7534	426	20	;	;	PUNCT
fuelectenerg-7534	426	21	this	this	PRON
fuelectenerg-7534	426	22	determines	determine	VERB
fuelectenerg-7534	426	23	a	a	DET
fuelectenerg-7534	426	24	constant	constant	ADJ
fuelectenerg-7534	426	25	demand	demand	NOUN
fuelectenerg-7534	426	26	of	of	ADP
fuelectenerg-7534	426	27	devices	device	NOUN
fuelectenerg-7534	426	28	characterized	characterize	VERB
fuelectenerg-7534	426	29	by	by	ADP
fuelectenerg-7534	426	30	low	low	ADJ
fuelectenerg-7534	426	31	cost	cost	NOUN
fuelectenerg-7534	426	32	and	and	CCONJ
fuelectenerg-7534	426	33	power	power	NOUN
fuelectenerg-7534	426	34	consumption	consumption	NOUN
fuelectenerg-7534	426	35	,	,	PUNCT
fuelectenerg-7534	426	36	small	small	ADJ
fuelectenerg-7534	426	37	size	size	NOUN
fuelectenerg-7534	426	38	,	,	PUNCT
fuelectenerg-7534	426	39	light	light	ADJ
fuelectenerg-7534	426	40	weight	weight	NOUN
fuelectenerg-7534	426	41	,	,	PUNCT
fuelectenerg-7534	426	42	wide	wide	ADJ
fuelectenerg-7534	426	43	tunability	tunability	NOUN
fuelectenerg-7534	426	44	and	and	CCONJ
fuelectenerg-7534	426	45	high	high	ADJ
fuelectenerg-7534	426	46	performances	performance	NOUN
fuelectenerg-7534	426	47	.	.	PUNCT
fuelectenerg-7534	427	1	these	these	DET
fuelectenerg-7534	427	2	motivations	motivation	NOUN
fuelectenerg-7534	427	3	make	make	VERB
fuelectenerg-7534	427	4	the	the	DET
fuelectenerg-7534	427	5	design	design	NOUN
fuelectenerg-7534	427	6	of	of	ADP
fuelectenerg-7534	427	7	reconfigurable	reconfigurable	ADJ
fuelectenerg-7534	427	8	filters	filter	NOUN
fuelectenerg-7534	427	9	a	a	DET
fuelectenerg-7534	427	10	particularly	particularly	ADV
fuelectenerg-7534	427	11	challenging	challenging	ADJ
fuelectenerg-7534	427	12	task	task	NOUN
fuelectenerg-7534	427	13	,	,	PUNCT
fuelectenerg-7534	427	14	under	under	ADP
fuelectenerg-7534	427	15	a	a	DET
fuelectenerg-7534	427	16	constant	constant	ADJ
fuelectenerg-7534	427	17	attention	attention	NOUN
fuelectenerg-7534	427	18	by	by	ADP
fuelectenerg-7534	427	19	researchers	researcher	NOUN
fuelectenerg-7534	427	20	.	.	PUNCT
fuelectenerg-7534	428	1	the	the	DET
fuelectenerg-7534	428	2	generic	generic	ADJ
fuelectenerg-7534	428	3	structure	structure	NOUN
fuelectenerg-7534	428	4	of	of	ADP
fuelectenerg-7534	428	5	a	a	DET
fuelectenerg-7534	428	6	reconfigurable	reconfigurable	ADJ
fuelectenerg-7534	428	7	filter	filter	NOUN
fuelectenerg-7534	428	8	includes	include	VERB
fuelectenerg-7534	428	9	a	a	DET
fuelectenerg-7534	428	10	resonator	resonator	NOUN
fuelectenerg-7534	428	11	,	,	PUNCT
fuelectenerg-7534	428	12	made	make	VERB
fuelectenerg-7534	428	13	by	by	ADP
fuelectenerg-7534	428	14	various	various	ADJ
fuelectenerg-7534	428	15	types	type	NOUN
fuelectenerg-7534	428	16	of	of	ADP
fuelectenerg-7534	428	17	transmission	transmission	NOUN
fuelectenerg-7534	428	18	lines	line	NOUN
fuelectenerg-7534	428	19	,	,	PUNCT
fuelectenerg-7534	428	20	lumped	lump	VERB
fuelectenerg-7534	428	21	elements	element	NOUN
fuelectenerg-7534	428	22	,	,	PUNCT
fuelectenerg-7534	428	23	cavities	cavity	NOUN
fuelectenerg-7534	428	24	or	or	CCONJ
fuelectenerg-7534	428	25	dielectric	dielectric	ADJ
fuelectenerg-7534	428	26	solids	solid	NOUN
fuelectenerg-7534	428	27	,	,	PUNCT
fuelectenerg-7534	428	28	whose	whose	DET
fuelectenerg-7534	428	29	resonant	resonant	ADJ
fuelectenerg-7534	428	30	frequency	frequency	NOUN
fuelectenerg-7534	428	31	,	,	PUNCT
fuelectenerg-7534	428	32	bandwidth	bandwidth	NOUN
fuelectenerg-7534	428	33	or	or	CCONJ
fuelectenerg-7534	428	34	filtering	filter	VERB
fuelectenerg-7534	428	35	nature	nature	NOUN
fuelectenerg-7534	428	36	is	be	AUX
fuelectenerg-7534	428	37	modified	modify	VERB
fuelectenerg-7534	428	38	by	by	ADP
fuelectenerg-7534	428	39	tuning	tune	VERB
fuelectenerg-7534	428	40	elements	element	NOUN
fuelectenerg-7534	428	41	[	[	X
fuelectenerg-7534	428	42	102	102	NUM
fuelectenerg-7534	428	43	]	]	PUNCT
fuelectenerg-7534	428	44	.	.	PUNCT
fuelectenerg-7534	429	1	from	from	ADP
fuelectenerg-7534	429	2	the	the	DET
fuelectenerg-7534	429	3	point	point	NOUN
fuelectenerg-7534	429	4	of	of	ADP
fuelectenerg-7534	429	5	view	view	NOUN
fuelectenerg-7534	429	6	of	of	ADP
fuelectenerg-7534	429	7	classification	classification	NOUN
fuelectenerg-7534	429	8	,	,	PUNCT
fuelectenerg-7534	429	9	these	these	DET
fuelectenerg-7534	429	10	devices	device	NOUN
fuelectenerg-7534	429	11	can	can	AUX
fuelectenerg-7534	429	12	be	be	AUX
fuelectenerg-7534	429	13	categorized	categorize	VERB
fuelectenerg-7534	429	14	on	on	ADP
fuelectenerg-7534	429	15	the	the	DET
fuelectenerg-7534	429	16	basis	basis	NOUN
fuelectenerg-7534	429	17	of	of	ADP
fuelectenerg-7534	429	18	their	their	PRON
fuelectenerg-7534	429	19	resonators	resonator	NOUN
fuelectenerg-7534	429	20	.	.	PUNCT
fuelectenerg-7534	430	1	bearing	bear	VERB
fuelectenerg-7534	430	2	this	this	PRON
fuelectenerg-7534	430	3	in	in	ADP
fuelectenerg-7534	430	4	mind	mind	NOUN
fuelectenerg-7534	430	5	,	,	PUNCT
fuelectenerg-7534	430	6	the	the	DET
fuelectenerg-7534	430	7	three	three	NUM
fuelectenerg-7534	430	8	main	main	ADJ
fuelectenerg-7534	430	9	categories	category	NOUN
fuelectenerg-7534	430	10	consist	consist	VERB
fuelectenerg-7534	430	11	in	in	ADP
fuelectenerg-7534	430	12	3d	3d	NUM
fuelectenerg-7534	430	13	,	,	PUNCT
fuelectenerg-7534	430	14	planar	planar	ADJ
fuelectenerg-7534	430	15	,	,	PUNCT
fuelectenerg-7534	430	16	or	or	CCONJ
fuelectenerg-7534	430	17	lumped	lump	VERB
fuelectenerg-7534	430	18	lc	lc	PROPN
fuelectenerg-7534	430	19	structures	structure	NOUN
fuelectenerg-7534	430	20	.	.	PUNCT
fuelectenerg-7534	431	1	the	the	DET
fuelectenerg-7534	431	2	first	first	ADJ
fuelectenerg-7534	431	3	one	one	NOUN
fuelectenerg-7534	431	4	includes	include	VERB
fuelectenerg-7534	431	5	resonators	resonator	NOUN
fuelectenerg-7534	431	6	made	make	VERB
fuelectenerg-7534	431	7	by	by	ADP
fuelectenerg-7534	431	8	waveguides	waveguide	NOUN
fuelectenerg-7534	431	9	(	(	PUNCT
fuelectenerg-7534	431	10	e.g.	e.g.	ADV
fuelectenerg-7534	431	11	substrate	substrate	NOUN
fuelectenerg-7534	431	12	integrated	integrate	VERB
fuelectenerg-7534	431	13	waveguides	waveguide	NOUN
fuelectenerg-7534	431	14	siw	siw	NOUN
fuelectenerg-7534	431	15	)	)	PUNCT
fuelectenerg-7534	431	16	,	,	PUNCT
fuelectenerg-7534	431	17	cavities	cavity	NOUN
fuelectenerg-7534	431	18	(	(	PUNCT
fuelectenerg-7534	431	19	e.g.	e.g.	ADV
fuelectenerg-7534	431	20	evanescent	evanescent	NOUN
fuelectenerg-7534	431	21	-	-	PUNCT
fuelectenerg-7534	431	22	mode	mode	NOUN
fuelectenerg-7534	431	23	resonators	resonator	NOUN
fuelectenerg-7534	431	24	eva	eva	PROPN
fuelectenerg-7534	431	25	)	)	PUNCT
fuelectenerg-7534	431	26	and	and	CCONJ
fuelectenerg-7534	431	27	dielectric	dielectric	ADJ
fuelectenerg-7534	431	28	resonators	resonator	NOUN
fuelectenerg-7534	431	29	(	(	PUNCT
fuelectenerg-7534	431	30	dr	dr	PROPN
fuelectenerg-7534	431	31	)	)	PUNCT
fuelectenerg-7534	431	32	.	.	PUNCT
fuelectenerg-7534	432	1	for	for	ADP
fuelectenerg-7534	432	2	the	the	DET
fuelectenerg-7534	432	3	sake	sake	NOUN
fuelectenerg-7534	432	4	of	of	ADP
fuelectenerg-7534	432	5	brevity	brevity	NOUN
fuelectenerg-7534	432	6	,	,	PUNCT
fuelectenerg-7534	432	7	resonators	resonator	NOUN
fuelectenerg-7534	432	8	exploiting	exploit	VERB
fuelectenerg-7534	432	9	acoustic	acoustic	ADJ
fuelectenerg-7534	432	10	or	or	CCONJ
fuelectenerg-7534	432	11	ferromagnetic	ferromagnetic	ADJ
fuelectenerg-7534	432	12	principles	principle	NOUN
fuelectenerg-7534	432	13	are	be	AUX
fuelectenerg-7534	432	14	not	not	PART
fuelectenerg-7534	432	15	discussed	discuss	VERB
fuelectenerg-7534	432	16	in	in	ADP
fuelectenerg-7534	432	17	the	the	DET
fuelectenerg-7534	432	18	present	present	ADJ
fuelectenerg-7534	432	19	treatise	treatise	NOUN
fuelectenerg-7534	432	20	.	.	PUNCT
fuelectenerg-7534	433	1	the	the	DET
fuelectenerg-7534	433	2	second	second	ADJ
fuelectenerg-7534	433	3	category	category	NOUN
fuelectenerg-7534	433	4	is	be	AUX
fuelectenerg-7534	433	5	composed	compose	VERB
fuelectenerg-7534	433	6	by	by	ADP
fuelectenerg-7534	433	7	resonant	resonant	ADJ
fuelectenerg-7534	433	8	structures	structure	NOUN
fuelectenerg-7534	433	9	made	make	VERB
fuelectenerg-7534	433	10	with	with	ADP
fuelectenerg-7534	433	11	cpw	cpw	NOUN
fuelectenerg-7534	433	12	,	,	PUNCT
fuelectenerg-7534	433	13	microstrip	microstrip	NOUN
fuelectenerg-7534	433	14	and	and	CCONJ
fuelectenerg-7534	433	15	striplines	stripline	NOUN
fuelectenerg-7534	433	16	,	,	PUNCT
fuelectenerg-7534	433	17	generally	generally	ADV
fuelectenerg-7534	433	18	arranged	arrange	VERB
fuelectenerg-7534	433	19	according	accord	VERB
fuelectenerg-7534	433	20	to	to	ADP
fuelectenerg-7534	433	21	different	different	ADJ
fuelectenerg-7534	433	22	layouts	layout	NOUN
fuelectenerg-7534	433	23	,	,	PUNCT
fuelectenerg-7534	433	24	such	such	ADJ
fuelectenerg-7534	433	25	as	as	ADP
fuelectenerg-7534	433	26	comb	comb	NOUN
fuelectenerg-7534	433	27	-	-	PUNCT
fuelectenerg-7534	433	28	line	line	NOUN
fuelectenerg-7534	433	29	,	,	PUNCT
fuelectenerg-7534	433	30	hairpin	hairpin	NOUN
fuelectenerg-7534	433	31	or	or	CCONJ
fuelectenerg-7534	433	32	edge	edge	NOUN
fuelectenerg-7534	433	33	-	-	PUNCT
fuelectenerg-7534	433	34	coupled	couple	VERB
fuelectenerg-7534	433	35	configurations	configuration	NOUN
fuelectenerg-7534	433	36	.	.	PUNCT
fuelectenerg-7534	434	1	lc	lc	NOUN
fuelectenerg-7534	434	2	structures	structure	NOUN
fuelectenerg-7534	434	3	are	be	AUX
fuelectenerg-7534	434	4	usually	usually	ADV
fuelectenerg-7534	434	5	employed	employ	VERB
fuelectenerg-7534	434	6	at	at	ADP
fuelectenerg-7534	434	7	lower	low	ADJ
fuelectenerg-7534	434	8	frequencies	frequency	NOUN
fuelectenerg-7534	434	9	(	(	PUNCT
fuelectenerg-7534	434	10	<	<	X
fuelectenerg-7534	434	11	1	1	NUM
fuelectenerg-7534	434	12	ghz	ghz	NOUN
fuelectenerg-7534	434	13	)	)	PUNCT
fuelectenerg-7534	434	14	,	,	PUNCT
fuelectenerg-7534	434	15	as	as	SCONJ
fuelectenerg-7534	434	16	the	the	DET
fuelectenerg-7534	434	17	wavelength	wavelength	NOUN
fuelectenerg-7534	434	18	of	of	ADP
fuelectenerg-7534	434	19	signals	signal	NOUN
fuelectenerg-7534	434	20	would	would	AUX
fuelectenerg-7534	434	21	make	make	VERB
fuelectenerg-7534	434	22	inconvenient	inconvenient	ADJ
fuelectenerg-7534	434	23	the	the	DET
fuelectenerg-7534	434	24	use	use	NOUN
fuelectenerg-7534	434	25	of	of	ADP
fuelectenerg-7534	434	26	planar	planar	ADJ
fuelectenerg-7534	434	27	structures	structure	NOUN
fuelectenerg-7534	434	28	[	[	X
fuelectenerg-7534	434	29	103	103	NUM
fuelectenerg-7534	434	30	]	]	PUNCT
fuelectenerg-7534	434	31	.	.	PUNCT
fuelectenerg-7534	435	1	the	the	DET
fuelectenerg-7534	435	2	reconfigurability	reconfigurability	NOUN
fuelectenerg-7534	435	3	of	of	ADP
fuelectenerg-7534	435	4	these	these	DET
fuelectenerg-7534	435	5	devices	device	NOUN
fuelectenerg-7534	435	6	is	be	AUX
fuelectenerg-7534	435	7	provided	provide	VERB
fuelectenerg-7534	435	8	by	by	ADP
fuelectenerg-7534	435	9	tuning	tune	VERB
fuelectenerg-7534	435	10	elements	element	NOUN
fuelectenerg-7534	435	11	,	,	PUNCT
fuelectenerg-7534	435	12	which	which	PRON
fuelectenerg-7534	435	13	are	be	AUX
fuelectenerg-7534	435	14	generally	generally	ADV
fuelectenerg-7534	435	15	represented	represent	VERB
fuelectenerg-7534	435	16	by	by	ADP
fuelectenerg-7534	435	17	banks	bank	NOUN
fuelectenerg-7534	435	18	of	of	ADP
fuelectenerg-7534	435	19	capacitors	capacitor	NOUN
fuelectenerg-7534	435	20	,	,	PUNCT
fuelectenerg-7534	435	21	varactors	varactor	NOUN
fuelectenerg-7534	435	22	,	,	PUNCT
fuelectenerg-7534	435	23	switches	switch	NOUN
fuelectenerg-7534	435	24	to	to	PART
fuelectenerg-7534	435	25	select	select	VERB
fuelectenerg-7534	435	26	reactive	reactive	ADJ
fuelectenerg-7534	435	27	loads	load	NOUN
fuelectenerg-7534	435	28	,	,	PUNCT
fuelectenerg-7534	435	29	or	or	CCONJ
fuelectenerg-7534	435	30	actuation	actuation	NOUN
fuelectenerg-7534	435	31	mechanisms	mechanism	NOUN
fuelectenerg-7534	435	32	that	that	PRON
fuelectenerg-7534	435	33	modify	modify	VERB
fuelectenerg-7534	435	34	the	the	DET
fuelectenerg-7534	435	35	dimensional	dimensional	ADJ
fuelectenerg-7534	435	36	(	(	PUNCT
fuelectenerg-7534	435	37	and	and	CCONJ
fuelectenerg-7534	435	38	thus	thus	ADV
fuelectenerg-7534	435	39	electrical	electrical	ADJ
fuelectenerg-7534	435	40	)	)	PUNCT
fuelectenerg-7534	435	41	features	feature	NOUN
fuelectenerg-7534	435	42	of	of	ADP
fuelectenerg-7534	435	43	the	the	DET
fuelectenerg-7534	435	44	resonator	resonator	NOUN
fuelectenerg-7534	435	45	.	.	PUNCT
fuelectenerg-7534	436	1	rf	rf	VERB
fuelectenerg-7534	436	2	-	-	PUNCT
fuelectenerg-7534	436	3	mems	mem	NOUN
fuelectenerg-7534	436	4	technology	technology	NOUN
fuelectenerg-7534	436	5	applied	apply	VERB
fuelectenerg-7534	436	6	as	as	ADP
fuelectenerg-7534	436	7	a	a	DET
fuelectenerg-7534	436	8	valuable	valuable	ADJ
fuelectenerg-7534	436	9	candidate	candidate	NOUN
fuelectenerg-7534	436	10	for	for	ADP
fuelectenerg-7534	436	11	widening	widen	VERB
fuelectenerg-7534	436	12	reconfigurability	reconfigurability	NOUN
fuelectenerg-7534	436	13	in	in	ADP
fuelectenerg-7534	436	14	filters	filter	NOUN
fuelectenerg-7534	436	15	since	since	SCONJ
fuelectenerg-7534	436	16	the	the	DET
fuelectenerg-7534	436	17	early	early	ADJ
fuelectenerg-7534	436	18	2000s	2000	NOUN
fuelectenerg-7534	436	19	[	[	X
fuelectenerg-7534	436	20	104	104	NUM
fuelectenerg-7534	436	21	]	]	PUNCT
fuelectenerg-7534	436	22	,	,	PUNCT
fuelectenerg-7534	436	23	capitalizing	capitalize	VERB
fuelectenerg-7534	436	24	on	on	ADP
fuelectenerg-7534	436	25	its	its	PRON
fuelectenerg-7534	436	26	intrinsic	intrinsic	ADJ
fuelectenerg-7534	436	27	high	high	ADJ
fuelectenerg-7534	436	28	quality	quality	NOUN
fuelectenerg-7534	436	29	factor	factor	NOUN
fuelectenerg-7534	436	30	(	(	PUNCT
fuelectenerg-7534	436	31	q	q	NOUN
fuelectenerg-7534	436	32	)	)	PUNCT
fuelectenerg-7534	436	33	,	,	PUNCT
fuelectenerg-7534	436	34	negligible	negligible	ADJ
fuelectenerg-7534	436	35	losses	loss	NOUN
fuelectenerg-7534	436	36	and	and	CCONJ
fuelectenerg-7534	436	37	power	power	NOUN
fuelectenerg-7534	436	38	consumption	consumption	NOUN
fuelectenerg-7534	436	39	,	,	PUNCT
fuelectenerg-7534	436	40	and	and	CCONJ
fuelectenerg-7534	436	41	simple	simple	ADJ
fuelectenerg-7534	436	42	biasing	biasing	NOUN
fuelectenerg-7534	436	43	of	of	ADP
fuelectenerg-7534	436	44	its	its	PRON
fuelectenerg-7534	436	45	switches	switch	NOUN
fuelectenerg-7534	436	46	and	and	CCONJ
fuelectenerg-7534	436	47	lumped	lump	VERB
fuelectenerg-7534	436	48	components	component	NOUN
fuelectenerg-7534	436	49	.	.	PUNCT
fuelectenerg-7534	437	1	for	for	ADP
fuelectenerg-7534	437	2	the	the	DET
fuelectenerg-7534	437	3	sake	sake	NOUN
fuelectenerg-7534	437	4	of	of	ADP
fuelectenerg-7534	437	5	completeness	completeness	NOUN
fuelectenerg-7534	437	6	,	,	PUNCT
fuelectenerg-7534	437	7	semiconductors	semiconductor	NOUN
fuelectenerg-7534	437	8	represent	represent	VERB
fuelectenerg-7534	437	9	another	another	DET
fuelectenerg-7534	437	10	common	common	ADJ
fuelectenerg-7534	437	11	choice	choice	NOUN
fuelectenerg-7534	437	12	as	as	ADP
fuelectenerg-7534	437	13	tuning	tune	VERB
fuelectenerg-7534	437	14	element	element	NOUN
fuelectenerg-7534	437	15	,	,	PUNCT
fuelectenerg-7534	437	16	but	but	CCONJ
fuelectenerg-7534	437	17	they	they	PRON
fuelectenerg-7534	437	18	are	be	AUX
fuelectenerg-7534	437	19	employed	employ	VERB
fuelectenerg-7534	437	20	only	only	ADV
fuelectenerg-7534	437	21	when	when	SCONJ
fuelectenerg-7534	437	22	a	a	DET
fuelectenerg-7534	437	23	short	short	ADJ
fuelectenerg-7534	437	24	switching	switching	NOUN
fuelectenerg-7534	437	25	time	time	NOUN
fuelectenerg-7534	437	26	is	be	AUX
fuelectenerg-7534	437	27	a	a	DET
fuelectenerg-7534	437	28	primary	primary	ADJ
fuelectenerg-7534	437	29	concern	concern	NOUN
fuelectenerg-7534	437	30	,	,	PUNCT
fuelectenerg-7534	437	31	due	due	ADP
fuelectenerg-7534	437	32	to	to	ADP
fuelectenerg-7534	437	33	their	their	PRON
fuelectenerg-7534	437	34	inconvenient	inconvenient	ADJ
fuelectenerg-7534	437	35	losses	loss	NOUN
fuelectenerg-7534	437	36	and	and	CCONJ
fuelectenerg-7534	437	37	quality	quality	NOUN
fuelectenerg-7534	437	38	factor	factor	NOUN
fuelectenerg-7534	437	39	[	[	X
fuelectenerg-7534	437	40	105	105	NUM
fuelectenerg-7534	437	41	]	]	PUNCT
fuelectenerg-7534	437	42	.	.	PUNCT
fuelectenerg-7534	438	1	filters	filter	NOUN
fuelectenerg-7534	438	2	can	can	AUX
fuelectenerg-7534	438	3	be	be	AUX
fuelectenerg-7534	438	4	evaluated	evaluate	VERB
fuelectenerg-7534	438	5	on	on	ADP
fuelectenerg-7534	438	6	the	the	DET
fuelectenerg-7534	438	7	basis	basis	NOUN
fuelectenerg-7534	438	8	of	of	ADP
fuelectenerg-7534	438	9	power	power	NOUN
fuelectenerg-7534	438	10	handling	handling	NOUN
fuelectenerg-7534	438	11	and	and	CCONJ
fuelectenerg-7534	438	12	consumption	consumption	NOUN
fuelectenerg-7534	438	13	,	,	PUNCT
fuelectenerg-7534	438	14	linearity	linearity	NOUN
fuelectenerg-7534	438	15	and	and	CCONJ
fuelectenerg-7534	438	16	tuning	tune	VERB
fuelectenerg-7534	438	17	speed	speed	NOUN
fuelectenerg-7534	438	18	,	,	PUNCT
fuelectenerg-7534	438	19	but	but	CCONJ
fuelectenerg-7534	438	20	features	feature	NOUN
fuelectenerg-7534	438	21	like	like	ADP
fuelectenerg-7534	438	22	q	q	NOUN
fuelectenerg-7534	438	23	,	,	PUNCT
fuelectenerg-7534	438	24	tuning	tune	VERB
fuelectenerg-7534	438	25	range	range	NOUN
fuelectenerg-7534	438	26	,	,	PUNCT
fuelectenerg-7534	438	27	insertion	insertion	NOUN
fuelectenerg-7534	438	28	and	and	CCONJ
fuelectenerg-7534	438	29	return	return	VERB
fuelectenerg-7534	438	30	loss	loss	NOUN
fuelectenerg-7534	438	31	,	,	PUNCT
fuelectenerg-7534	438	32	size	size	NOUN
fuelectenerg-7534	438	33	and	and	CCONJ
fuelectenerg-7534	438	34	integrability	integrability	NOUN
fuelectenerg-7534	438	35	with	with	ADP
fuelectenerg-7534	438	36	common	common	ADJ
fuelectenerg-7534	438	37	electronic	electronic	ADJ
fuelectenerg-7534	438	38	supports	support	NOUN
fuelectenerg-7534	438	39	,	,	PUNCT
fuelectenerg-7534	438	40	remain	remain	VERB
fuelectenerg-7534	438	41	the	the	DET
fuelectenerg-7534	438	42	most	most	ADV
fuelectenerg-7534	438	43	accepted	accepted	ADJ
fuelectenerg-7534	438	44	figures	figure	NOUN
fuelectenerg-7534	438	45	of	of	ADP
fuelectenerg-7534	438	46	merit	merit	NOUN
fuelectenerg-7534	438	47	.	.	PUNCT
fuelectenerg-7534	439	1	considering	consider	VERB
fuelectenerg-7534	439	2	the	the	DET
fuelectenerg-7534	439	3	vast	vast	ADJ
fuelectenerg-7534	439	4	amount	amount	NOUN
fuelectenerg-7534	439	5	of	of	ADP
fuelectenerg-7534	439	6	literature	literature	NOUN
fuelectenerg-7534	439	7	in	in	ADP
fuelectenerg-7534	439	8	this	this	DET
fuelectenerg-7534	439	9	field	field	NOUN
fuelectenerg-7534	439	10	,	,	PUNCT
fuelectenerg-7534	439	11	some	some	DET
fuelectenerg-7534	439	12	interesting	interesting	ADJ
fuelectenerg-7534	439	13	research	research	NOUN
fuelectenerg-7534	439	14	solutions	solution	NOUN
fuelectenerg-7534	439	15	of	of	ADP
fuelectenerg-7534	439	16	the	the	DET
fuelectenerg-7534	439	17	last	last	ADJ
fuelectenerg-7534	439	18	half	half	ADJ
fuelectenerg-7534	439	19	decade	decade	NOUN
fuelectenerg-7534	439	20	are	be	AUX
fuelectenerg-7534	439	21	reported	report	VERB
fuelectenerg-7534	439	22	in	in	ADP
fuelectenerg-7534	439	23	the	the	DET
fuelectenerg-7534	439	24	next	next	ADJ
fuelectenerg-7534	439	25	paragraphs	paragraph	NOUN
fuelectenerg-7534	439	26	.	.	PUNCT
fuelectenerg-7534	440	1	tables	table	NOUN
fuelectenerg-7534	440	2	7	7	NUM
fuelectenerg-7534	440	3	and	and	CCONJ
fuelectenerg-7534	440	4	8	8	NUM
fuelectenerg-7534	440	5	are	be	AUX
fuelectenerg-7534	440	6	provided	provide	VERB
fuelectenerg-7534	440	7	along	along	ADP
fuelectenerg-7534	440	8	the	the	DET
fuelectenerg-7534	440	9	present	present	ADJ
fuelectenerg-7534	440	10	section	section	NOUN
fuelectenerg-7534	440	11	,	,	PUNCT
fuelectenerg-7534	440	12	for	for	ADP
fuelectenerg-7534	440	13	a	a	DET
fuelectenerg-7534	440	14	better	well	ADJ
fuelectenerg-7534	440	15	comparison	comparison	NOUN
fuelectenerg-7534	440	16	of	of	ADP
fuelectenerg-7534	440	17	the	the	DET
fuelectenerg-7534	440	18	different	different	ADJ
fuelectenerg-7534	440	19	research	research	NOUN
fuelectenerg-7534	440	20	items	item	NOUN
fuelectenerg-7534	440	21	in	in	ADP
fuelectenerg-7534	440	22	terms	term	NOUN
fuelectenerg-7534	440	23	of	of	ADP
fuelectenerg-7534	440	24	their	their	PRON
fuelectenerg-7534	440	25	features	feature	NOUN
fuelectenerg-7534	440	26	.	.	PUNCT
fuelectenerg-7534	441	1	356	356	NUM
fuelectenerg-7534	441	2	g.	g.	NOUN
fuelectenerg-7534	441	3	tagliapietra	tagliapietra	PROPN
fuelectenerg-7534	441	4	,	,	PUNCT
fuelectenerg-7534	441	5	j.	j.	PROPN
fuelectenerg-7534	441	6	iannacci	iannacci	PROPN
fuelectenerg-7534	441	7	6.1	6.1	NUM
fuelectenerg-7534	441	8	.	.	PUNCT
fuelectenerg-7534	442	1	three	three	NUM
fuelectenerg-7534	442	2	-	-	PUNCT
fuelectenerg-7534	442	3	dimensional	dimensional	ADJ
fuelectenerg-7534	442	4	regarding	regard	VERB
fuelectenerg-7534	442	5	resonators	resonator	NOUN
fuelectenerg-7534	442	6	based	base	VERB
fuelectenerg-7534	442	7	on	on	ADP
fuelectenerg-7534	442	8	waveguides	waveguide	NOUN
fuelectenerg-7534	442	9	,	,	PUNCT
fuelectenerg-7534	442	10	k	k	PROPN
fuelectenerg-7534	442	11	band	band	NOUN
fuelectenerg-7534	442	12	application	application	NOUN
fuelectenerg-7534	442	13	and	and	CCONJ
fuelectenerg-7534	442	14	a	a	DET
fuelectenerg-7534	442	15	high	high	ADJ
fuelectenerg-7534	442	16	q	q	NOUN
fuelectenerg-7534	442	17	factor	factor	NOUN
fuelectenerg-7534	442	18	are	be	AUX
fuelectenerg-7534	442	19	the	the	DET
fuelectenerg-7534	442	20	target	target	NOUN
fuelectenerg-7534	442	21	of	of	ADP
fuelectenerg-7534	442	22	the	the	DET
fuelectenerg-7534	442	23	bandpass	bandpass	NOUN
fuelectenerg-7534	442	24	filters	filter	NOUN
fuelectenerg-7534	442	25	reported	report	VERB
fuelectenerg-7534	442	26	in	in	ADP
fuelectenerg-7534	442	27	[	[	X
fuelectenerg-7534	442	28	106	106	NUM
fuelectenerg-7534	442	29	]	]	PUNCT
fuelectenerg-7534	442	30	.	.	PUNCT
fuelectenerg-7534	443	1	among	among	ADP
fuelectenerg-7534	443	2	the	the	DET
fuelectenerg-7534	443	3	different	different	ADJ
fuelectenerg-7534	443	4	discussed	discuss	VERB
fuelectenerg-7534	443	5	realizations	realization	NOUN
fuelectenerg-7534	443	6	,	,	PUNCT
fuelectenerg-7534	443	7	an	an	DET
fuelectenerg-7534	443	8	interesting	interesting	ADJ
fuelectenerg-7534	443	9	realization	realization	NOUN
fuelectenerg-7534	443	10	is	be	AUX
fuelectenerg-7534	443	11	the	the	DET
fuelectenerg-7534	443	12	one	one	NUM
fuelectenerg-7534	443	13	adopting	adopt	VERB
fuelectenerg-7534	443	14	virtual	virtual	ADJ
fuelectenerg-7534	443	15	movable	movable	ADJ
fuelectenerg-7534	443	16	walls	wall	NOUN
fuelectenerg-7534	443	17	.	.	PUNCT
fuelectenerg-7534	444	1	in	in	ADP
fuelectenerg-7534	444	2	this	this	DET
fuelectenerg-7534	444	3	approach	approach	NOUN
fuelectenerg-7534	444	4	,	,	PUNCT
fuelectenerg-7534	444	5	the	the	DET
fuelectenerg-7534	444	6	resonator	resonator	NOUN
fuelectenerg-7534	444	7	is	be	AUX
fuelectenerg-7534	444	8	obtained	obtain	VERB
fuelectenerg-7534	444	9	by	by	ADP
fuelectenerg-7534	444	10	inserting	insert	VERB
fuelectenerg-7534	444	11	spaced	space	VERB
fuelectenerg-7534	444	12	metallic	metallic	ADJ
fuelectenerg-7534	444	13	septa	septum	NOUN
fuelectenerg-7534	444	14	along	along	ADP
fuelectenerg-7534	444	15	the	the	DET
fuelectenerg-7534	444	16	e	e	NOUN
fuelectenerg-7534	444	17	-	-	NOUN
fuelectenerg-7534	444	18	plane	plane	NOUN
fuelectenerg-7534	444	19	(	(	PUNCT
fuelectenerg-7534	444	20	the	the	DET
fuelectenerg-7534	444	21	plane	plane	NOUN
fuelectenerg-7534	444	22	along	along	ADP
fuelectenerg-7534	444	23	which	which	PRON
fuelectenerg-7534	444	24	electric	electric	ADJ
fuelectenerg-7534	444	25	field	field	NOUN
fuelectenerg-7534	444	26	propagates	propagate	VERB
fuelectenerg-7534	444	27	)	)	PUNCT
fuelectenerg-7534	444	28	in	in	ADP
fuelectenerg-7534	444	29	the	the	DET
fuelectenerg-7534	444	30	center	center	NOUN
fuelectenerg-7534	444	31	of	of	ADP
fuelectenerg-7534	444	32	the	the	DET
fuelectenerg-7534	444	33	waveguide	waveguide	NOUN
fuelectenerg-7534	444	34	.	.	PUNCT
fuelectenerg-7534	445	1	the	the	DET
fuelectenerg-7534	445	2	lateral	lateral	ADJ
fuelectenerg-7534	445	3	walls	wall	NOUN
fuelectenerg-7534	445	4	of	of	ADP
fuelectenerg-7534	445	5	the	the	DET
fuelectenerg-7534	445	6	waveguide	waveguide	NOUN
fuelectenerg-7534	445	7	facing	face	VERB
fuelectenerg-7534	445	8	the	the	DET
fuelectenerg-7534	445	9	septa	septum	NOUN
fuelectenerg-7534	445	10	present	present	VERB
fuelectenerg-7534	445	11	a	a	DET
fuelectenerg-7534	445	12	recess	recess	NOUN
fuelectenerg-7534	445	13	,	,	PUNCT
fuelectenerg-7534	445	14	and	and	CCONJ
fuelectenerg-7534	445	15	six	six	NUM
fuelectenerg-7534	445	16	dies	die	NOUN
fuelectenerg-7534	445	17	are	be	AUX
fuelectenerg-7534	445	18	arranged	arrange	VERB
fuelectenerg-7534	445	19	on	on	ADP
fuelectenerg-7534	445	20	the	the	DET
fuelectenerg-7534	445	21	wall	wall	NOUN
fuelectenerg-7534	445	22	.	.	PUNCT
fuelectenerg-7534	446	1	each	each	DET
fuelectenerg-7534	446	2	die	die	NOUN
fuelectenerg-7534	446	3	is	be	AUX
fuelectenerg-7534	446	4	composed	compose	VERB
fuelectenerg-7534	446	5	by	by	ADP
fuelectenerg-7534	446	6	a	a	DET
fuelectenerg-7534	446	7	quartz	quartz	NOUN
fuelectenerg-7534	446	8	substrate	substrate	NOUN
fuelectenerg-7534	446	9	on	on	ADP
fuelectenerg-7534	446	10	which	which	PRON
fuelectenerg-7534	446	11	a	a	DET
fuelectenerg-7534	446	12	conductive	conductive	ADJ
fuelectenerg-7534	446	13	path	path	NOUN
fuelectenerg-7534	446	14	can	can	AUX
fuelectenerg-7534	446	15	be	be	AUX
fuelectenerg-7534	446	16	allowed	allow	VERB
fuelectenerg-7534	446	17	or	or	CCONJ
fuelectenerg-7534	446	18	avoided	avoid	VERB
fuelectenerg-7534	446	19	by	by	ADP
fuelectenerg-7534	446	20	an	an	DET
fuelectenerg-7534	446	21	ohmic	ohmic	ADJ
fuelectenerg-7534	446	22	switch	switch	NOUN
fuelectenerg-7534	446	23	.	.	PUNCT
fuelectenerg-7534	447	1	the	the	DET
fuelectenerg-7534	447	2	actuation	actuation	NOUN
fuelectenerg-7534	447	3	of	of	ADP
fuelectenerg-7534	447	4	the	the	DET
fuelectenerg-7534	447	5	switches	switch	NOUN
fuelectenerg-7534	447	6	allows	allow	VERB
fuelectenerg-7534	447	7	to	to	PART
fuelectenerg-7534	447	8	establish	establish	VERB
fuelectenerg-7534	447	9	a	a	DET
fuelectenerg-7534	447	10	conductive	conductive	ADJ
fuelectenerg-7534	447	11	path	path	NOUN
fuelectenerg-7534	447	12	that	that	PRON
fuelectenerg-7534	447	13	will	will	AUX
fuelectenerg-7534	447	14	electrically	electrically	ADV
fuelectenerg-7534	447	15	"	"	PUNCT
fuelectenerg-7534	447	16	hide	hide	VERB
fuelectenerg-7534	447	17	"	"	PUNCT
fuelectenerg-7534	447	18	the	the	DET
fuelectenerg-7534	447	19	lateral	lateral	ADJ
fuelectenerg-7534	447	20	recess	recess	NOUN
fuelectenerg-7534	447	21	of	of	ADP
fuelectenerg-7534	447	22	the	the	DET
fuelectenerg-7534	447	23	guide	guide	NOUN
fuelectenerg-7534	447	24	,	,	PUNCT
fuelectenerg-7534	447	25	varying	vary	VERB
fuelectenerg-7534	447	26	the	the	DET
fuelectenerg-7534	447	27	electrical	electrical	ADJ
fuelectenerg-7534	447	28	effective	effective	ADJ
fuelectenerg-7534	447	29	width	width	NOUN
fuelectenerg-7534	447	30	of	of	ADP
fuelectenerg-7534	447	31	the	the	DET
fuelectenerg-7534	447	32	resonant	resonant	ADJ
fuelectenerg-7534	447	33	cavity	cavity	NOUN
fuelectenerg-7534	447	34	represented	represent	VERB
fuelectenerg-7534	447	35	by	by	ADP
fuelectenerg-7534	447	36	the	the	DET
fuelectenerg-7534	447	37	space	space	NOUN
fuelectenerg-7534	447	38	between	between	ADP
fuelectenerg-7534	447	39	the	the	DET
fuelectenerg-7534	447	40	central	central	ADJ
fuelectenerg-7534	447	41	septa	septum	NOUN
fuelectenerg-7534	447	42	and	and	CCONJ
fuelectenerg-7534	447	43	lateral	lateral	ADJ
fuelectenerg-7534	447	44	walls	wall	NOUN
fuelectenerg-7534	447	45	.	.	PUNCT
fuelectenerg-7534	448	1	this	this	DET
fuelectenerg-7534	448	2	configuration	configuration	NOUN
fuelectenerg-7534	448	3	allowed	allow	VERB
fuelectenerg-7534	448	4	a	a	DET
fuelectenerg-7534	448	5	725	725	NUM
fuelectenerg-7534	448	6	mhz	mhz	NOUN
fuelectenerg-7534	448	7	shift	shift	NOUN
fuelectenerg-7534	448	8	from	from	ADP
fuelectenerg-7534	448	9	the	the	DET
fuelectenerg-7534	448	10	basic	basic	ADJ
fuelectenerg-7534	448	11	resonant	resonant	ADJ
fuelectenerg-7534	448	12	frequency	frequency	NOUN
fuelectenerg-7534	448	13	(	(	PUNCT
fuelectenerg-7534	448	14	22.17	22.17	NUM
fuelectenerg-7534	448	15	ghz	ghz	NOUN
fuelectenerg-7534	448	16	)	)	PUNCT
fuelectenerg-7534	448	17	.	.	PUNCT
fuelectenerg-7534	449	1	although	although	SCONJ
fuelectenerg-7534	449	2	its	its	PRON
fuelectenerg-7534	449	3	q	q	NOUN
fuelectenerg-7534	449	4	factor	factor	NOUN
fuelectenerg-7534	449	5	and	and	CCONJ
fuelectenerg-7534	449	6	electrical	electrical	ADJ
fuelectenerg-7534	449	7	performances	performance	NOUN
fuelectenerg-7534	449	8	are	be	AUX
fuelectenerg-7534	449	9	remarkable	remarkable	ADJ
fuelectenerg-7534	449	10	,	,	PUNCT
fuelectenerg-7534	449	11	the	the	DET
fuelectenerg-7534	449	12	device	device	NOUN
fuelectenerg-7534	449	13	is	be	AUX
fuelectenerg-7534	449	14	characterized	characterize	VERB
fuelectenerg-7534	449	15	by	by	ADP
fuelectenerg-7534	449	16	the	the	DET
fuelectenerg-7534	449	17	typically	typically	ADV
fuelectenerg-7534	449	18	huge	huge	ADJ
fuelectenerg-7534	449	19	dimensions	dimension	NOUN
fuelectenerg-7534	449	20	and	and	CCONJ
fuelectenerg-7534	449	21	aspect	aspect	VERB
fuelectenerg-7534	449	22	ratio	ratio	NOUN
fuelectenerg-7534	449	23	of	of	ADP
fuelectenerg-7534	449	24	waveguide	waveguide	NOUN
fuelectenerg-7534	449	25	-	-	PUNCT
fuelectenerg-7534	449	26	based	base	VERB
fuelectenerg-7534	449	27	devices	device	NOUN
fuelectenerg-7534	449	28	.	.	PUNCT
fuelectenerg-7534	450	1	in	in	ADP
fuelectenerg-7534	450	2	fact	fact	NOUN
fuelectenerg-7534	450	3	,	,	PUNCT
fuelectenerg-7534	450	4	the	the	DET
fuelectenerg-7534	450	5	overall	overall	ADJ
fuelectenerg-7534	450	6	length	length	NOUN
fuelectenerg-7534	450	7	(	(	PUNCT
fuelectenerg-7534	450	8	48	48	NUM
fuelectenerg-7534	450	9	mm	mm	NOUN
fuelectenerg-7534	450	10	)	)	PUNCT
fuelectenerg-7534	450	11	makes	make	VERB
fuelectenerg-7534	450	12	this	this	DET
fuelectenerg-7534	450	13	device	device	NOUN
fuelectenerg-7534	450	14	more	more	ADV
fuelectenerg-7534	450	15	suitable	suitable	ADJ
fuelectenerg-7534	450	16	for	for	ADP
fuelectenerg-7534	450	17	fixed	fixed	ADJ
fuelectenerg-7534	450	18	infrastructures	infrastructure	NOUN
fuelectenerg-7534	450	19	.	.	PUNCT
fuelectenerg-7534	451	1	another	another	DET
fuelectenerg-7534	451	2	bandpass	bandpass	NOUN
fuelectenerg-7534	451	3	implementation	implementation	NOUN
fuelectenerg-7534	451	4	featuring	feature	VERB
fuelectenerg-7534	451	5	waveguide	waveguide	ADJ
fuelectenerg-7534	451	6	resonant	resonant	ADJ
fuelectenerg-7534	451	7	cavities	cavity	NOUN
fuelectenerg-7534	451	8	is	be	AUX
fuelectenerg-7534	451	9	provided	provide	VERB
fuelectenerg-7534	451	10	by	by	ADP
fuelectenerg-7534	451	11	[	[	PUNCT
fuelectenerg-7534	451	12	107	107	NUM
fuelectenerg-7534	451	13	]	]	PUNCT
fuelectenerg-7534	451	14	,	,	PUNCT
fuelectenerg-7534	451	15	in	in	ADP
fuelectenerg-7534	451	16	which	which	PRON
fuelectenerg-7534	451	17	an	an	DET
fuelectenerg-7534	451	18	alternation	alternation	NOUN
fuelectenerg-7534	451	19	of	of	ADP
fuelectenerg-7534	451	20	inverters	inverter	NOUN
fuelectenerg-7534	451	21	and	and	CCONJ
fuelectenerg-7534	451	22	cavities	cavity	NOUN
fuelectenerg-7534	451	23	composes	compose	VERB
fuelectenerg-7534	451	24	the	the	DET
fuelectenerg-7534	451	25	whole	whole	ADJ
fuelectenerg-7534	451	26	structure	structure	NOUN
fuelectenerg-7534	451	27	.	.	PUNCT
fuelectenerg-7534	452	1	the	the	DET
fuelectenerg-7534	452	2	three	three	NUM
fuelectenerg-7534	452	3	stages	stage	NOUN
fuelectenerg-7534	452	4	of	of	ADP
fuelectenerg-7534	452	5	inverters	inverter	NOUN
fuelectenerg-7534	452	6	consist	consist	VERB
fuelectenerg-7534	452	7	in	in	ADP
fuelectenerg-7534	452	8	dielectric	dielectric	ADJ
fuelectenerg-7534	452	9	substrate	substrate	NOUN
fuelectenerg-7534	452	10	laminates	laminate	NOUN
fuelectenerg-7534	452	11	on	on	ADP
fuelectenerg-7534	452	12	which	which	PRON
fuelectenerg-7534	452	13	rf	rf	ADJ
fuelectenerg-7534	452	14	-	-	PUNCT
fuelectenerg-7534	452	15	mems	mems	ADJ
fuelectenerg-7534	452	16	switches	switch	NOUN
fuelectenerg-7534	452	17	are	be	AUX
fuelectenerg-7534	452	18	integrated	integrate	VERB
fuelectenerg-7534	452	19	,	,	PUNCT
fuelectenerg-7534	452	20	whose	whose	DET
fuelectenerg-7534	452	21	activation	activation	NOUN
fuelectenerg-7534	452	22	allows	allow	VERB
fuelectenerg-7534	452	23	a	a	DET
fuelectenerg-7534	452	24	2,4	2,4	NUM
fuelectenerg-7534	452	25	ghz	ghz	NOUN
fuelectenerg-7534	452	26	tuning	tuning	NOUN
fuelectenerg-7534	452	27	range	range	NOUN
fuelectenerg-7534	452	28	for	for	ADP
fuelectenerg-7534	452	29	the	the	DET
fuelectenerg-7534	452	30	resonance	resonance	NOUN
fuelectenerg-7534	452	31	of	of	ADP
fuelectenerg-7534	452	32	the	the	DET
fuelectenerg-7534	452	33	two	two	NUM
fuelectenerg-7534	452	34	cavities	cavity	NOUN
fuelectenerg-7534	452	35	,	,	PUNCT
fuelectenerg-7534	452	36	up	up	ADP
fuelectenerg-7534	452	37	to	to	PART
fuelectenerg-7534	452	38	14.6	14.6	NUM
fuelectenerg-7534	452	39	ghz	ghz	NOUN
fuelectenerg-7534	452	40	,	,	PUNCT
fuelectenerg-7534	452	41	by	by	ADP
fuelectenerg-7534	452	42	three	three	NUM
fuelectenerg-7534	452	43	possible	possible	ADJ
fuelectenerg-7534	452	44	intermediate	intermediate	ADJ
fuelectenerg-7534	452	45	steps	step	NOUN
fuelectenerg-7534	452	46	.	.	PUNCT
fuelectenerg-7534	453	1	also	also	ADV
fuelectenerg-7534	453	2	in	in	ADP
fuelectenerg-7534	453	3	the	the	DET
fuelectenerg-7534	453	4	case	case	NOUN
fuelectenerg-7534	453	5	of	of	ADP
fuelectenerg-7534	453	6	this	this	DET
fuelectenerg-7534	453	7	device	device	NOUN
fuelectenerg-7534	453	8	for	for	ADP
fuelectenerg-7534	453	9	ku	ku	PROPN
fuelectenerg-7534	453	10	band	band	NOUN
fuelectenerg-7534	453	11	applications	application	NOUN
fuelectenerg-7534	453	12	,	,	PUNCT
fuelectenerg-7534	453	13	a	a	DET
fuelectenerg-7534	453	14	remarkable	remarkable	ADJ
fuelectenerg-7534	453	15	q	q	NOUN
fuelectenerg-7534	453	16	factor	factor	NOUN
fuelectenerg-7534	453	17	is	be	AUX
fuelectenerg-7534	453	18	achieved	achieve	VERB
fuelectenerg-7534	453	19	for	for	ADP
fuelectenerg-7534	453	20	the	the	DET
fuelectenerg-7534	453	21	three	three	NUM
fuelectenerg-7534	453	22	states	state	NOUN
fuelectenerg-7534	453	23	,	,	PUNCT
fuelectenerg-7534	453	24	at	at	ADP
fuelectenerg-7534	453	25	the	the	DET
fuelectenerg-7534	453	26	expenses	expense	NOUN
fuelectenerg-7534	453	27	of	of	ADP
fuelectenerg-7534	453	28	volume	volume	NOUN
fuelectenerg-7534	453	29	and	and	CCONJ
fuelectenerg-7534	453	30	aspect	aspect	NOUN
fuelectenerg-7534	453	31	ratio	ratio	NOUN
fuelectenerg-7534	453	32	.	.	PUNCT
fuelectenerg-7534	454	1	regarding	regard	VERB
fuelectenerg-7534	454	2	resonators	resonator	NOUN
fuelectenerg-7534	454	3	based	base	VERB
fuelectenerg-7534	454	4	on	on	ADP
fuelectenerg-7534	454	5	eva	eva	NOUN
fuelectenerg-7534	454	6	cavities	cavity	NOUN
fuelectenerg-7534	454	7	,	,	PUNCT
fuelectenerg-7534	454	8	k	k	PROPN
fuelectenerg-7534	454	9	and	and	CCONJ
fuelectenerg-7534	454	10	ka	ka	PROPN
fuelectenerg-7534	454	11	are	be	AUX
fuelectenerg-7534	454	12	the	the	DET
fuelectenerg-7534	454	13	bands	band	NOUN
fuelectenerg-7534	454	14	selected	select	VERB
fuelectenerg-7534	454	15	by	by	ADP
fuelectenerg-7534	454	16	the	the	DET
fuelectenerg-7534	454	17	authors	author	NOUN
fuelectenerg-7534	454	18	of	of	ADP
fuelectenerg-7534	454	19	[	[	X
fuelectenerg-7534	454	20	108][109	108][109	NUM
fuelectenerg-7534	454	21	]	]	X
fuelectenerg-7534	454	22	,	,	PUNCT
fuelectenerg-7534	454	23	for	for	ADP
fuelectenerg-7534	454	24	their	their	PRON
fuelectenerg-7534	454	25	bandpass	bandpass	NOUN
fuelectenerg-7534	454	26	filter	filter	NOUN
fuelectenerg-7534	454	27	.	.	PUNCT
fuelectenerg-7534	455	1	the	the	DET
fuelectenerg-7534	455	2	structure	structure	NOUN
fuelectenerg-7534	455	3	of	of	ADP
fuelectenerg-7534	455	4	the	the	DET
fuelectenerg-7534	455	5	resonator	resonator	NOUN
fuelectenerg-7534	455	6	is	be	AUX
fuelectenerg-7534	455	7	traditional	traditional	ADJ
fuelectenerg-7534	455	8	:	:	PUNCT
fuelectenerg-7534	455	9	a	a	DET
fuelectenerg-7534	455	10	gold	gold	NOUN
fuelectenerg-7534	455	11	-	-	PUNCT
fuelectenerg-7534	455	12	sputtered	sputter	VERB
fuelectenerg-7534	455	13	cavity	cavity	NOUN
fuelectenerg-7534	455	14	on	on	ADP
fuelectenerg-7534	455	15	silicon	silicon	NOUN
fuelectenerg-7534	455	16	substrate	substrate	NOUN
fuelectenerg-7534	455	17	,	,	PUNCT
fuelectenerg-7534	455	18	encompassing	encompass	VERB
fuelectenerg-7534	455	19	two	two	NUM
fuelectenerg-7534	455	20	posts	post	NOUN
fuelectenerg-7534	455	21	,	,	PUNCT
fuelectenerg-7534	455	22	and	and	CCONJ
fuelectenerg-7534	455	23	covered	cover	VERB
fuelectenerg-7534	455	24	by	by	ADP
fuelectenerg-7534	455	25	a	a	DET
fuelectenerg-7534	455	26	diaphragm	diaphragm	PROPN
fuelectenerg-7534	455	27	.	.	PUNCT
fuelectenerg-7534	456	1	the	the	DET
fuelectenerg-7534	456	2	two	two	NUM
fuelectenerg-7534	456	3	areas	area	NOUN
fuelectenerg-7534	456	4	of	of	ADP
fuelectenerg-7534	456	5	the	the	DET
fuelectenerg-7534	456	6	diaphragm	diaphragm	NOUN
fuelectenerg-7534	456	7	near	near	ADP
fuelectenerg-7534	456	8	the	the	DET
fuelectenerg-7534	456	9	posts	post	NOUN
fuelectenerg-7534	456	10	are	be	AUX
fuelectenerg-7534	456	11	provided	provide	VERB
fuelectenerg-7534	456	12	with	with	ADP
fuelectenerg-7534	456	13	electrodes	electrode	NOUN
fuelectenerg-7534	456	14	,	,	PUNCT
fuelectenerg-7534	456	15	for	for	ADP
fuelectenerg-7534	456	16	a	a	DET
fuelectenerg-7534	456	17	variable	variable	ADJ
fuelectenerg-7534	456	18	deflection	deflection	NOUN
fuelectenerg-7534	456	19	of	of	ADP
fuelectenerg-7534	456	20	the	the	DET
fuelectenerg-7534	456	21	two	two	NUM
fuelectenerg-7534	456	22	areas	area	NOUN
fuelectenerg-7534	456	23	toward	toward	ADP
fuelectenerg-7534	456	24	the	the	DET
fuelectenerg-7534	456	25	underlying	underlie	VERB
fuelectenerg-7534	456	26	posts	post	NOUN
fuelectenerg-7534	456	27	.	.	PUNCT
fuelectenerg-7534	457	1	in	in	ADP
fuelectenerg-7534	457	2	this	this	DET
fuelectenerg-7534	457	3	configuration	configuration	NOUN
fuelectenerg-7534	457	4	,	,	PUNCT
fuelectenerg-7534	457	5	the	the	DET
fuelectenerg-7534	457	6	resonant	resonant	ADJ
fuelectenerg-7534	457	7	frequency	frequency	NOUN
fuelectenerg-7534	457	8	(	(	PUNCT
fuelectenerg-7534	457	9	20	20	NUM
fuelectenerg-7534	457	10	ghz	ghz	NOUN
fuelectenerg-7534	457	11	)	)	PUNCT
fuelectenerg-7534	457	12	of	of	ADP
fuelectenerg-7534	457	13	the	the	DET
fuelectenerg-7534	457	14	cavity	cavity	NOUN
fuelectenerg-7534	457	15	can	can	AUX
fuelectenerg-7534	457	16	be	be	AUX
fuelectenerg-7534	457	17	shifted	shift	VERB
fuelectenerg-7534	457	18	through	through	ADP
fuelectenerg-7534	457	19	the	the	DET
fuelectenerg-7534	457	20	deflection	deflection	NOUN
fuelectenerg-7534	457	21	,	,	PUNCT
fuelectenerg-7534	457	22	which	which	PRON
fuelectenerg-7534	457	23	modifies	modify	VERB
fuelectenerg-7534	457	24	the	the	DET
fuelectenerg-7534	457	25	capacitance	capacitance	NOUN
fuelectenerg-7534	457	26	between	between	ADP
fuelectenerg-7534	457	27	the	the	DET
fuelectenerg-7534	457	28	posts	post	NOUN
fuelectenerg-7534	457	29	and	and	CCONJ
fuelectenerg-7534	457	30	the	the	DET
fuelectenerg-7534	457	31	corresponding	corresponding	ADJ
fuelectenerg-7534	457	32	areas	area	NOUN
fuelectenerg-7534	457	33	of	of	ADP
fuelectenerg-7534	457	34	the	the	DET
fuelectenerg-7534	457	35	diaphragm	diaphragm	PROPN
fuelectenerg-7534	457	36	.	.	PUNCT
fuelectenerg-7534	458	1	this	this	DET
fuelectenerg-7534	458	2	architecture	architecture	NOUN
fuelectenerg-7534	458	3	enabled	enable	VERB
fuelectenerg-7534	458	4	a	a	DET
fuelectenerg-7534	458	5	high	high	ADJ
fuelectenerg-7534	458	6	q	q	NOUN
fuelectenerg-7534	458	7	factor	factor	NOUN
fuelectenerg-7534	458	8	and	and	CCONJ
fuelectenerg-7534	458	9	an	an	DET
fuelectenerg-7534	458	10	outstanding	outstanding	ADJ
fuelectenerg-7534	458	11	continuous	continuous	ADJ
fuelectenerg-7534	458	12	tuning	tuning	NOUN
fuelectenerg-7534	458	13	range	range	NOUN
fuelectenerg-7534	458	14	of	of	ADP
fuelectenerg-7534	458	15	20	20	NUM
fuelectenerg-7534	458	16	ghz	ghz	NOUN
fuelectenerg-7534	458	17	,	,	PUNCT
fuelectenerg-7534	458	18	still	still	ADV
fuelectenerg-7534	458	19	maintaining	maintain	VERB
fuelectenerg-7534	458	20	good	good	ADJ
fuelectenerg-7534	458	21	electrical	electrical	ADJ
fuelectenerg-7534	458	22	performances	performance	NOUN
fuelectenerg-7534	458	23	.	.	PUNCT
fuelectenerg-7534	459	1	the	the	DET
fuelectenerg-7534	459	2	price	price	NOUN
fuelectenerg-7534	459	3	to	to	PART
fuelectenerg-7534	459	4	pay	pay	VERB
fuelectenerg-7534	459	5	for	for	ADP
fuelectenerg-7534	459	6	such	such	ADJ
fuelectenerg-7534	459	7	achievements	achievement	NOUN
fuelectenerg-7534	459	8	corresponds	correspond	VERB
fuelectenerg-7534	459	9	to	to	ADP
fuelectenerg-7534	459	10	the	the	DET
fuelectenerg-7534	459	11	typical	typical	ADJ
fuelectenerg-7534	459	12	drawbacks	drawback	NOUN
fuelectenerg-7534	459	13	of	of	ADP
fuelectenerg-7534	459	14	micromachined	micromachine	VERB
fuelectenerg-7534	459	15	3d	3d	NUM
fuelectenerg-7534	459	16	resonators	resonator	NOUN
fuelectenerg-7534	459	17	:	:	PUNCT
fuelectenerg-7534	459	18	increased	increase	VERB
fuelectenerg-7534	459	19	complexity	complexity	NOUN
fuelectenerg-7534	459	20	of	of	ADP
fuelectenerg-7534	459	21	fabrication	fabrication	NOUN
fuelectenerg-7534	459	22	and	and	CCONJ
fuelectenerg-7534	459	23	large	large	ADJ
fuelectenerg-7534	459	24	actuation	actuation	NOUN
fuelectenerg-7534	459	25	voltages	voltage	NOUN
fuelectenerg-7534	459	26	.	.	PUNCT
fuelectenerg-7534	460	1	the	the	DET
fuelectenerg-7534	460	2	same	same	ADJ
fuelectenerg-7534	460	3	arrangement	arrangement	NOUN
fuelectenerg-7534	460	4	is	be	AUX
fuelectenerg-7534	460	5	adopted	adopt	VERB
fuelectenerg-7534	460	6	for	for	ADP
fuelectenerg-7534	460	7	the	the	DET
fuelectenerg-7534	460	8	development	development	NOUN
fuelectenerg-7534	460	9	of	of	ADP
fuelectenerg-7534	460	10	the	the	DET
fuelectenerg-7534	460	11	tunable	tunable	ADJ
fuelectenerg-7534	460	12	filter	filter	NOUN
fuelectenerg-7534	460	13	presented	present	VERB
fuelectenerg-7534	460	14	in	in	ADP
fuelectenerg-7534	460	15	[	[	X
fuelectenerg-7534	460	16	110	110	NUM
fuelectenerg-7534	460	17	]	]	PUNCT
fuelectenerg-7534	460	18	,	,	PUNCT
fuelectenerg-7534	460	19	operating	operate	VERB
fuelectenerg-7534	460	20	in	in	ADP
fuelectenerg-7534	460	21	v	v	NUM
fuelectenerg-7534	460	22	band	band	NOUN
fuelectenerg-7534	460	23	.	.	PUNCT
fuelectenerg-7534	461	1	the	the	DET
fuelectenerg-7534	461	2	two	two	NUM
fuelectenerg-7534	461	3	-	-	PUNCT
fuelectenerg-7534	461	4	pole	pole	NOUN
fuelectenerg-7534	461	5	filter	filter	NOUN
fuelectenerg-7534	461	6	demonstrated	demonstrate	VERB
fuelectenerg-7534	461	7	a	a	DET
fuelectenerg-7534	461	8	fairly	fairly	ADV
fuelectenerg-7534	461	9	wide	wide	ADJ
fuelectenerg-7534	461	10	tuning	tuning	NOUN
fuelectenerg-7534	461	11	range	range	NOUN
fuelectenerg-7534	461	12	(	(	PUNCT
fuelectenerg-7534	461	13	(	(	PUNCT
fuelectenerg-7534	461	14	57.763	57.763	NUM
fuelectenerg-7534	461	15	)	)	PUNCT
fuelectenerg-7534	461	16	ghz	ghz	NOUN
fuelectenerg-7534	461	17	)	)	PUNCT
fuelectenerg-7534	461	18	and	and	CCONJ
fuelectenerg-7534	461	19	limited	limited	ADJ
fuelectenerg-7534	461	20	insertion	insertion	NOUN
fuelectenerg-7534	461	21	loss	loss	NOUN
fuelectenerg-7534	461	22	,	,	PUNCT
fuelectenerg-7534	461	23	featuring	feature	VERB
fuelectenerg-7534	461	24	a	a	DET
fuelectenerg-7534	461	25	cpw	cpw	NOUN
fuelectenerg-7534	461	26	-	-	PUNCT
fuelectenerg-7534	461	27	microstrip	microstrip	NOUN
fuelectenerg-7534	461	28	transition	transition	NOUN
fuelectenerg-7534	461	29	for	for	ADP
fuelectenerg-7534	461	30	a	a	DET
fuelectenerg-7534	461	31	simpler	simple	ADJ
fuelectenerg-7534	461	32	integration	integration	NOUN
fuelectenerg-7534	461	33	on	on	ADP
fuelectenerg-7534	461	34	planar	planar	ADJ
fuelectenerg-7534	461	35	layout	layout	NOUN
fuelectenerg-7534	461	36	technologies	technology	NOUN
fuelectenerg-7534	461	37	.	.	PUNCT
fuelectenerg-7534	462	1	the	the	DET
fuelectenerg-7534	462	2	integration	integration	NOUN
fuelectenerg-7534	462	3	is	be	AUX
fuelectenerg-7534	462	4	simplified	simplify	VERB
fuelectenerg-7534	462	5	also	also	ADV
fuelectenerg-7534	462	6	by	by	ADP
fuelectenerg-7534	462	7	virtue	virtue	NOUN
fuelectenerg-7534	462	8	of	of	ADP
fuelectenerg-7534	462	9	a	a	DET
fuelectenerg-7534	462	10	further	further	ADJ
fuelectenerg-7534	462	11	advance	advance	NOUN
fuelectenerg-7534	462	12	in	in	ADP
fuelectenerg-7534	462	13	the	the	DET
fuelectenerg-7534	462	14	miniaturization	miniaturization	NOUN
fuelectenerg-7534	462	15	of	of	ADP
fuelectenerg-7534	462	16	such	such	ADJ
fuelectenerg-7534	462	17	device	device	NOUN
fuelectenerg-7534	462	18	,	,	PUNCT
fuelectenerg-7534	462	19	whose	whose	DET
fuelectenerg-7534	462	20	size	size	NOUN
fuelectenerg-7534	462	21	does	do	AUX
fuelectenerg-7534	462	22	not	not	PART
fuelectenerg-7534	462	23	exceed	exceed	VERB
fuelectenerg-7534	462	24	5x8	5x8	NUM
fuelectenerg-7534	462	25	mm2	mm2	NOUN
fuelectenerg-7534	462	26	.	.	PUNCT
fuelectenerg-7534	463	1	a	a	DET
fuelectenerg-7534	463	2	similar	similar	ADJ
fuelectenerg-7534	463	3	arrangement	arrangement	NOUN
fuelectenerg-7534	463	4	is	be	AUX
fuelectenerg-7534	463	5	proposed	propose	VERB
fuelectenerg-7534	463	6	for	for	ADP
fuelectenerg-7534	463	7	ku	ku	PROPN
fuelectenerg-7534	463	8	band	band	NOUN
fuelectenerg-7534	463	9	operations	operation	NOUN
fuelectenerg-7534	463	10	in	in	ADP
fuelectenerg-7534	463	11	[	[	X
fuelectenerg-7534	463	12	111	111	NUM
fuelectenerg-7534	463	13	]	]	PUNCT
fuelectenerg-7534	463	14	,	,	PUNCT
fuelectenerg-7534	463	15	with	with	ADP
fuelectenerg-7534	463	16	a	a	DET
fuelectenerg-7534	463	17	copper	copper	NOUN
fuelectenerg-7534	463	18	cavity	cavity	NOUN
fuelectenerg-7534	463	19	encompassing	encompass	VERB
fuelectenerg-7534	463	20	two	two	NUM
fuelectenerg-7534	463	21	internal	internal	ADJ
fuelectenerg-7534	463	22	posts	post	NOUN
fuelectenerg-7534	463	23	and	and	CCONJ
fuelectenerg-7534	463	24	fed	feed	VERB
fuelectenerg-7534	463	25	by	by	ADP
fuelectenerg-7534	463	26	cpw	cpw	NOUN
fuelectenerg-7534	463	27	line	line	NOUN
fuelectenerg-7534	463	28	.	.	PUNCT
fuelectenerg-7534	464	1	in	in	ADP
fuelectenerg-7534	464	2	this	this	DET
fuelectenerg-7534	464	3	case	case	NOUN
fuelectenerg-7534	464	4	two	two	NUM
fuelectenerg-7534	464	5	implementations	implementation	NOUN
fuelectenerg-7534	464	6	are	be	AUX
fuelectenerg-7534	464	7	offered	offer	VERB
fuelectenerg-7534	464	8	,	,	PUNCT
fuelectenerg-7534	464	9	one	one	NOUN
fuelectenerg-7534	464	10	using	use	VERB
fuelectenerg-7534	464	11	clamped	clamp	VERB
fuelectenerg-7534	464	12	-	-	PUNCT
fuelectenerg-7534	464	13	clamped	clamp	VERB
fuelectenerg-7534	464	14	rf	rf	ADJ
fuelectenerg-7534	464	15	-	-	PUNCT
fuelectenerg-7534	464	16	mems	mem	NOUN
fuelectenerg-7534	464	17	structures	structure	NOUN
fuelectenerg-7534	464	18	,	,	PUNCT
fuelectenerg-7534	464	19	and	and	CCONJ
fuelectenerg-7534	464	20	the	the	DET
fuelectenerg-7534	464	21	other	other	ADJ
fuelectenerg-7534	464	22	using	use	VERB
fuelectenerg-7534	464	23	disk	disk	NOUN
fuelectenerg-7534	464	24	-	-	PUNCT
fuelectenerg-7534	464	25	shaped	shape	VERB
fuelectenerg-7534	464	26	patches	patch	NOUN
fuelectenerg-7534	464	27	of	of	ADP
fuelectenerg-7534	464	28	vanadium	vanadium	NOUN
fuelectenerg-7534	464	29	dioxide	dioxide	NOUN
fuelectenerg-7534	464	30	(	(	PUNCT
fuelectenerg-7534	464	31	vo2	vo2	NOUN
fuelectenerg-7534	464	32	)	)	PUNCT
fuelectenerg-7534	464	33	as	as	ADP
fuelectenerg-7534	464	34	tuning	tune	VERB
fuelectenerg-7534	464	35	mechanism	mechanism	NOUN
fuelectenerg-7534	464	36	controlling	control	VERB
fuelectenerg-7534	464	37	the	the	DET
fuelectenerg-7534	464	38	areas	area	NOUN
fuelectenerg-7534	464	39	of	of	ADP
fuelectenerg-7534	464	40	the	the	DET
fuelectenerg-7534	464	41	diaphragm	diaphragm	NOUN
fuelectenerg-7534	464	42	facing	face	VERB
fuelectenerg-7534	464	43	the	the	DET
fuelectenerg-7534	464	44	posts	post	NOUN
fuelectenerg-7534	464	45	.	.	PUNCT
fuelectenerg-7534	465	1	the	the	DET
fuelectenerg-7534	465	2	second	second	ADJ
fuelectenerg-7534	465	3	approach	approach	NOUN
fuelectenerg-7534	465	4	involves	involve	VERB
fuelectenerg-7534	465	5	a	a	DET
fuelectenerg-7534	465	6	thermal	thermal	ADJ
fuelectenerg-7534	465	7	activation	activation	NOUN
fuelectenerg-7534	465	8	of	of	ADP
fuelectenerg-7534	465	9	such	such	ADJ
fuelectenerg-7534	465	10	material	material	NOUN
fuelectenerg-7534	465	11	to	to	PART
fuelectenerg-7534	465	12	trigger	trigger	VERB
fuelectenerg-7534	465	13	an	an	DET
fuelectenerg-7534	465	14	abrupt	abrupt	ADJ
fuelectenerg-7534	465	15	change	change	NOUN
fuelectenerg-7534	465	16	of	of	ADP
fuelectenerg-7534	465	17	conductivity	conductivity	NOUN
fuelectenerg-7534	465	18	(	(	PUNCT
fuelectenerg-7534	465	19	metal	metal	NOUN
fuelectenerg-7534	465	20	-	-	PUNCT
fuelectenerg-7534	465	21	to	to	ADP
fuelectenerg-7534	465	22	-	-	PUNCT
fuelectenerg-7534	465	23	insulator	insulator	NOUN
fuelectenerg-7534	465	24	transition	transition	NOUN
fuelectenerg-7534	465	25	)	)	PUNCT
fuelectenerg-7534	465	26	of	of	ADP
fuelectenerg-7534	465	27	the	the	DET
fuelectenerg-7534	465	28	material	material	NOUN
fuelectenerg-7534	465	29	,	,	PUNCT
fuelectenerg-7534	465	30	determining	determine	VERB
fuelectenerg-7534	465	31	in	in	ADP
fuelectenerg-7534	465	32	turn	turn	NOUN
fuelectenerg-7534	465	33	a	a	DET
fuelectenerg-7534	465	34	variation	variation	NOUN
fuelectenerg-7534	465	35	of	of	ADP
fuelectenerg-7534	465	36	the	the	DET
fuelectenerg-7534	465	37	parasitic	parasitic	ADJ
fuelectenerg-7534	465	38	capacitance	capacitance	NOUN
fuelectenerg-7534	465	39	between	between	ADP
fuelectenerg-7534	465	40	the	the	DET
fuelectenerg-7534	465	41	disks	disk	NOUN
fuelectenerg-7534	465	42	and	and	CCONJ
fuelectenerg-7534	465	43	the	the	DET
fuelectenerg-7534	465	44	a	a	DET
fuelectenerg-7534	465	45	comprehensive	comprehensive	ADJ
fuelectenerg-7534	465	46	overview	overview	NOUN
fuelectenerg-7534	465	47	of	of	ADP
fuelectenerg-7534	465	48	recent	recent	ADJ
fuelectenerg-7534	465	49	developments	development	NOUN
fuelectenerg-7534	465	50	in	in	ADP
fuelectenerg-7534	465	51	rf	rf	ADJ
fuelectenerg-7534	465	52	-	-	PUNCT
fuelectenerg-7534	465	53	mems	mems	ADJ
fuelectenerg-7534	465	54	technology	technology	NOUN
fuelectenerg-7534	465	55	357	357	NUM
fuelectenerg-7534	465	56	upper	upper	ADJ
fuelectenerg-7534	465	57	part	part	NOUN
fuelectenerg-7534	465	58	of	of	ADP
fuelectenerg-7534	465	59	the	the	DET
fuelectenerg-7534	465	60	posts	post	NOUN
fuelectenerg-7534	465	61	.	.	PUNCT
fuelectenerg-7534	466	1	this	this	DET
fuelectenerg-7534	466	2	strategy	strategy	NOUN
fuelectenerg-7534	466	3	allowed	allow	VERB
fuelectenerg-7534	466	4	to	to	PART
fuelectenerg-7534	466	5	achieve	achieve	VERB
fuelectenerg-7534	466	6	1	1	NUM
fuelectenerg-7534	466	7	ghz	ghz	NOUN
fuelectenerg-7534	466	8	tuning	tuning	NOUN
fuelectenerg-7534	466	9	range	range	NOUN
fuelectenerg-7534	466	10	from	from	ADP
fuelectenerg-7534	466	11	the	the	DET
fuelectenerg-7534	466	12	original	original	ADJ
fuelectenerg-7534	466	13	resonant	resonant	NOUN
fuelectenerg-7534	466	14	frequency	frequency	NOUN
fuelectenerg-7534	466	15	(	(	PUNCT
fuelectenerg-7534	466	16	14.7	14.7	NUM
fuelectenerg-7534	466	17	ghz	ghz	NOUN
fuelectenerg-7534	466	18	)	)	PUNCT
fuelectenerg-7534	466	19	,	,	PUNCT
fuelectenerg-7534	466	20	still	still	ADV
fuelectenerg-7534	466	21	providing	provide	VERB
fuelectenerg-7534	466	22	a	a	DET
fuelectenerg-7534	466	23	satisfying	satisfying	ADJ
fuelectenerg-7534	466	24	q	q	NOUN
fuelectenerg-7534	466	25	factor	factor	NOUN
fuelectenerg-7534	466	26	and	and	CCONJ
fuelectenerg-7534	466	27	reasonable	reasonable	ADJ
fuelectenerg-7534	466	28	electrical	electrical	ADJ
fuelectenerg-7534	466	29	performances	performance	NOUN
fuelectenerg-7534	466	30	.	.	PUNCT
fuelectenerg-7534	467	1	table	table	NOUN
fuelectenerg-7534	467	2	7	7	NUM
fuelectenerg-7534	467	3	comparison	comparison	NOUN
fuelectenerg-7534	467	4	between	between	ADP
fuelectenerg-7534	467	5	the	the	DET
fuelectenerg-7534	467	6	different	different	ADJ
fuelectenerg-7534	467	7	discussed	discuss	VERB
fuelectenerg-7534	467	8	realizations	realization	NOUN
fuelectenerg-7534	467	9	of	of	ADP
fuelectenerg-7534	467	10	filters	filter	NOUN
fuelectenerg-7534	467	11	.	.	PUNCT
fuelectenerg-7534	468	1	reported	report	VERB
fuelectenerg-7534	468	2	values	value	NOUN
fuelectenerg-7534	468	3	of	of	ADP
fuelectenerg-7534	468	4	return	return	NOUN
fuelectenerg-7534	468	5	loss	loss	NOUN
fuelectenerg-7534	468	6	and	and	CCONJ
fuelectenerg-7534	468	7	insertion	insertion	NOUN
fuelectenerg-7534	468	8	loss	loss	NOUN
fuelectenerg-7534	468	9	refer	refer	VERB
fuelectenerg-7534	468	10	to	to	ADP
fuelectenerg-7534	468	11	the	the	DET
fuelectenerg-7534	468	12	worst	bad	ADJ
fuelectenerg-7534	468	13	assumed	assume	VERB
fuelectenerg-7534	468	14	value	value	NOUN
fuelectenerg-7534	468	15	.	.	PUNCT
fuelectenerg-7534	469	1	work	work	NOUN
fuelectenerg-7534	469	2	type	type	NOUN
fuelectenerg-7534	469	3	(	(	PUNCT
fuelectenerg-7534	469	4	bp	bp	PROPN
fuelectenerg-7534	469	5	/	/	SYM
fuelectenerg-7534	469	6	bs	bs	NOUN
fuelectenerg-7534	469	7	)	)	PUNCT
fuelectenerg-7534	469	8	tuning	tune	VERB
fuelectenerg-7534	469	9	range	range	NOUN
fuelectenerg-7534	469	10	(	(	PUNCT
fuelectenerg-7534	469	11	%	%	INTJ
fuelectenerg-7534	469	12	)	)	PUNCT
fuelectenerg-7534	469	13	q	q	PROPN
fuelectenerg-7534	469	14	unloaded	unload	VERB
fuelectenerg-7534	469	15	ret	ret	PROPN
fuelectenerg-7534	469	16	.	.	PUNCT
fuelectenerg-7534	470	1	loss	loss	PROPN
fuelectenerg-7534	470	2	(	(	PUNCT
fuelectenerg-7534	470	3	db	db	NOUN
fuelectenerg-7534	470	4	)	)	PUNCT
fuelectenerg-7534	470	5	ins	in	NOUN
fuelectenerg-7534	470	6	.	.	PUNCT
fuelectenerg-7534	471	1	loss	loss	NOUN
fuelectenerg-7534	471	2	(	(	PUNCT
fuelectenerg-7534	471	3	db	db	NOUN
fuelectenerg-7534	471	4	)	)	PUNCT
fuelectenerg-7534	471	5	actuation	actuation	NOUN
fuelectenerg-7534	471	6	(	(	PUNCT
fuelectenerg-7534	471	7	v	v	NOUN
fuelectenerg-7534	471	8	)	)	PUNCT
fuelectenerg-7534	472	1	[	[	X
fuelectenerg-7534	472	2	106	106	NUM
fuelectenerg-7534	472	3	]	]	PUNCT
fuelectenerg-7534	472	4	bp	bp	PROPN
fuelectenerg-7534	472	5	3.2	3.2	NUM
fuelectenerg-7534	472	6	1450	1450	NUM
fuelectenerg-7534	472	7	-13	-13	PUNCT
fuelectenerg-7534	473	1	-1.3	-1.3	PROPN
fuelectenerg-7534	473	2	70	70	NUM
fuelectenerg-7534	473	3	[	[	SYM
fuelectenerg-7534	473	4	107	107	NUM
fuelectenerg-7534	473	5	]	]	SYM
fuelectenerg-7534	473	6	bp	bp	PROPN
fuelectenerg-7534	473	7	18	18	NUM
fuelectenerg-7534	473	8	1700	1700	NUM
fuelectenerg-7534	473	9	-15	-15	SYM
fuelectenerg-7534	473	10	-0.7	-0.7	PROPN
fuelectenerg-7534	473	11	100	100	NUM
fuelectenerg-7534	473	12	[	[	X
fuelectenerg-7534	473	13	108	108	NUM
fuelectenerg-7534	473	14	]	]	SYM
fuelectenerg-7534	473	15	bp	bp	PROPN
fuelectenerg-7534	473	16	100	100	NUM
fuelectenerg-7534	473	17	540	540	NUM
fuelectenerg-7534	473	18	-15	-15	NUM
fuelectenerg-7534	473	19	-3.09	-3.09	NUM
fuelectenerg-7534	473	20	180	180	NUM
fuelectenerg-7534	473	21	[	[	SYM
fuelectenerg-7534	473	22	110	110	NUM
fuelectenerg-7534	473	23	]	]	SYM
fuelectenerg-7534	473	24	bp	bp	PROPN
fuelectenerg-7534	473	25	9	9	NUM
fuelectenerg-7534	473	26	330	330	NUM
fuelectenerg-7534	473	27	-2.9	-2.9	NOUN
fuelectenerg-7534	473	28	140	140	NUM
fuelectenerg-7534	473	29	[	[	SYM
fuelectenerg-7534	473	30	111	111	NUM
fuelectenerg-7534	473	31	]	]	PUNCT
fuelectenerg-7534	473	32	bp	bp	PROPN
fuelectenerg-7534	473	33	7	7	NUM
fuelectenerg-7534	473	34	1198	1198	NUM
fuelectenerg-7534	473	35	-14	-14	NUM
fuelectenerg-7534	473	36	-2.26	-2.26	NUM
fuelectenerg-7534	473	37	[	[	X
fuelectenerg-7534	473	38	112	112	NUM
fuelectenerg-7534	473	39	]	]	PUNCT
fuelectenerg-7534	473	40	bp	bp	PROPN
fuelectenerg-7534	473	41	200	200	NUM
fuelectenerg-7534	473	42	64	64	NUM
fuelectenerg-7534	473	43	-10.5	-10.5	NUM
fuelectenerg-7534	473	44	-3.5	-3.5	NUM
fuelectenerg-7534	473	45	0.5	0.5	NUM
fuelectenerg-7534	473	46	[	[	SYM
fuelectenerg-7534	473	47	113	113	NUM
fuelectenerg-7534	473	48	]	]	SYM
fuelectenerg-7534	473	49	bp	bp	PROPN
fuelectenerg-7534	473	50	3	3	NUM
fuelectenerg-7534	473	51	3850	3850	NUM
fuelectenerg-7534	473	52	-0.44	-0.44	NUM
fuelectenerg-7534	473	53	[	[	X
fuelectenerg-7534	473	54	114	114	NUM
fuelectenerg-7534	473	55	]	]	PUNCT
fuelectenerg-7534	473	56	bp	bp	PROPN
fuelectenerg-7534	473	57	35	35	NUM
fuelectenerg-7534	473	58	92	92	NUM
fuelectenerg-7534	473	59	-10	-10	NUM
fuelectenerg-7534	473	60	-4.29	-4.29	NOUN
fuelectenerg-7534	474	1	[	[	X
fuelectenerg-7534	474	2	115	115	NUM
fuelectenerg-7534	474	3	]	]	PUNCT
fuelectenerg-7534	474	4	bp	bp	PROPN
fuelectenerg-7534	474	5	19	19	NUM
fuelectenerg-7534	474	6	22	22	NUM
fuelectenerg-7534	474	7	-15	-15	SYM
fuelectenerg-7534	474	8	-0.2	-0.2	NOUN
fuelectenerg-7534	474	9	another	another	DET
fuelectenerg-7534	474	10	analog	analog	NOUN
fuelectenerg-7534	474	11	filter	filter	NOUN
fuelectenerg-7534	474	12	based	base	VERB
fuelectenerg-7534	474	13	on	on	ADP
fuelectenerg-7534	474	14	metallic	metallic	ADJ
fuelectenerg-7534	474	15	cavity	cavity	NOUN
fuelectenerg-7534	474	16	and	and	CCONJ
fuelectenerg-7534	474	17	inner	inner	ADJ
fuelectenerg-7534	474	18	post	post	NOUN
fuelectenerg-7534	474	19	is	be	AUX
fuelectenerg-7534	474	20	provided	provide	VERB
fuelectenerg-7534	474	21	by	by	ADP
fuelectenerg-7534	474	22	[	[	X
fuelectenerg-7534	474	23	112	112	NUM
fuelectenerg-7534	474	24	]	]	PUNCT
fuelectenerg-7534	474	25	.	.	PUNCT
fuelectenerg-7534	475	1	this	this	DET
fuelectenerg-7534	475	2	implementation	implementation	NOUN
fuelectenerg-7534	475	3	involves	involve	VERB
fuelectenerg-7534	475	4	a	a	DET
fuelectenerg-7534	475	5	sort	sort	NOUN
fuelectenerg-7534	475	6	of	of	ADP
fuelectenerg-7534	475	7	inverted	inverted	ADJ
fuelectenerg-7534	475	8	arrangement	arrangement	NOUN
fuelectenerg-7534	475	9	:	:	PUNCT
fuelectenerg-7534	475	10	the	the	DET
fuelectenerg-7534	475	11	post	post	NOUN
fuelectenerg-7534	475	12	arises	arise	VERB
fuelectenerg-7534	475	13	in	in	ADP
fuelectenerg-7534	475	14	the	the	DET
fuelectenerg-7534	475	15	vertical	vertical	ADJ
fuelectenerg-7534	475	16	direction	direction	NOUN
fuelectenerg-7534	475	17	from	from	ADP
fuelectenerg-7534	475	18	the	the	DET
fuelectenerg-7534	475	19	upper	upper	ADJ
fuelectenerg-7534	475	20	side	side	NOUN
fuelectenerg-7534	475	21	,	,	PUNCT
fuelectenerg-7534	475	22	facing	face	VERB
fuelectenerg-7534	475	23	the	the	DET
fuelectenerg-7534	475	24	movable	movable	ADJ
fuelectenerg-7534	475	25	membrane	membrane	NOUN
fuelectenerg-7534	475	26	on	on	ADP
fuelectenerg-7534	475	27	the	the	DET
fuelectenerg-7534	475	28	bottom	bottom	ADJ
fuelectenerg-7534	475	29	side	side	NOUN
fuelectenerg-7534	475	30	of	of	ADP
fuelectenerg-7534	475	31	the	the	DET
fuelectenerg-7534	475	32	cavity	cavity	NOUN
fuelectenerg-7534	475	33	.	.	PUNCT
fuelectenerg-7534	476	1	among	among	ADP
fuelectenerg-7534	476	2	the	the	DET
fuelectenerg-7534	476	3	different	different	ADJ
fuelectenerg-7534	476	4	realizations	realization	NOUN
fuelectenerg-7534	476	5	,	,	PUNCT
fuelectenerg-7534	476	6	the	the	DET
fuelectenerg-7534	476	7	most	most	ADV
fuelectenerg-7534	476	8	interesting	interesting	ADJ
fuelectenerg-7534	476	9	one	one	NOUN
fuelectenerg-7534	476	10	is	be	AUX
fuelectenerg-7534	476	11	represented	represent	VERB
fuelectenerg-7534	476	12	by	by	ADP
fuelectenerg-7534	476	13	a	a	DET
fuelectenerg-7534	476	14	45	45	NUM
fuelectenerg-7534	476	15	°	°	ADJ
fuelectenerg-7534	476	16	top	top	ADJ
fuelectenerg-7534	476	17	-	-	PUNCT
fuelectenerg-7534	476	18	angled	angle	VERB
fuelectenerg-7534	476	19	post	post	NOUN
fuelectenerg-7534	476	20	facing	face	VERB
fuelectenerg-7534	476	21	the	the	DET
fuelectenerg-7534	476	22	gold	gold	ADJ
fuelectenerg-7534	476	23	plate	plate	NOUN
fuelectenerg-7534	476	24	tuned	tune	VERB
fuelectenerg-7534	476	25	by	by	ADP
fuelectenerg-7534	476	26	thermally	thermally	ADV
fuelectenerg-7534	476	27	driven	drive	VERB
fuelectenerg-7534	476	28	actuators	actuator	NOUN
fuelectenerg-7534	476	29	.	.	PUNCT
fuelectenerg-7534	477	1	the	the	DET
fuelectenerg-7534	477	2	need	need	NOUN
fuelectenerg-7534	477	3	for	for	ADP
fuelectenerg-7534	477	4	a	a	DET
fuelectenerg-7534	477	5	precise	precise	ADJ
fuelectenerg-7534	477	6	and	and	CCONJ
fuelectenerg-7534	477	7	constant	constant	ADJ
fuelectenerg-7534	477	8	control	control	NOUN
fuelectenerg-7534	477	9	over	over	ADP
fuelectenerg-7534	477	10	the	the	DET
fuelectenerg-7534	477	11	position	position	NOUN
fuelectenerg-7534	477	12	of	of	ADP
fuelectenerg-7534	477	13	the	the	DET
fuelectenerg-7534	477	14	membrane	membrane	NOUN
fuelectenerg-7534	477	15	determines	determine	VERB
fuelectenerg-7534	477	16	the	the	DET
fuelectenerg-7534	477	17	presence	presence	NOUN
fuelectenerg-7534	477	18	of	of	ADP
fuelectenerg-7534	477	19	a	a	DET
fuelectenerg-7534	477	20	sensing	sense	VERB
fuelectenerg-7534	477	21	capacitance	capacitance	NOUN
fuelectenerg-7534	477	22	and	and	CCONJ
fuelectenerg-7534	477	23	a	a	DET
fuelectenerg-7534	477	24	polysilicon	polysilicon	NOUN
fuelectenerg-7534	477	25	thermometer	thermometer	NOUN
fuelectenerg-7534	477	26	under	under	ADP
fuelectenerg-7534	477	27	the	the	DET
fuelectenerg-7534	477	28	membrane	membrane	NOUN
fuelectenerg-7534	477	29	,	,	PUNCT
fuelectenerg-7534	477	30	enabling	enable	VERB
fuelectenerg-7534	477	31	a	a	DET
fuelectenerg-7534	477	32	closed	closed	ADJ
fuelectenerg-7534	477	33	-	-	PUNCT
fuelectenerg-7534	477	34	loop	loop	NOUN
fuelectenerg-7534	477	35	control	control	NOUN
fuelectenerg-7534	477	36	of	of	ADP
fuelectenerg-7534	477	37	the	the	DET
fuelectenerg-7534	477	38	power	power	NOUN
fuelectenerg-7534	477	39	supplied	supply	VERB
fuelectenerg-7534	477	40	to	to	ADP
fuelectenerg-7534	477	41	the	the	DET
fuelectenerg-7534	477	42	actuators	actuator	NOUN
fuelectenerg-7534	477	43	.	.	PUNCT
fuelectenerg-7534	478	1	the	the	DET
fuelectenerg-7534	478	2	simulated	simulate	VERB
fuelectenerg-7534	478	3	performances	performance	NOUN
fuelectenerg-7534	478	4	of	of	ADP
fuelectenerg-7534	478	5	such	such	ADJ
fuelectenerg-7534	478	6	arrangement	arrangement	NOUN
fuelectenerg-7534	478	7	demonstrated	demonstrate	VERB
fuelectenerg-7534	478	8	a	a	DET
fuelectenerg-7534	478	9	wide	wide	ADJ
fuelectenerg-7534	478	10	continuous	continuous	ADJ
fuelectenerg-7534	478	11	tuning	tuning	NOUN
fuelectenerg-7534	478	12	range	range	NOUN
fuelectenerg-7534	478	13	,	,	PUNCT
fuelectenerg-7534	478	14	concerning	concern	VERB
fuelectenerg-7534	478	15	c	c	NUM
fuelectenerg-7534	478	16	,	,	PUNCT
fuelectenerg-7534	478	17	x	x	NOUN
fuelectenerg-7534	478	18	,	,	PUNCT
fuelectenerg-7534	478	19	and	and	CCONJ
fuelectenerg-7534	478	20	ku	ku	PROPN
fuelectenerg-7534	478	21	bands	band	NOUN
fuelectenerg-7534	478	22	in	in	ADP
fuelectenerg-7534	478	23	the	the	DET
fuelectenerg-7534	478	24	(	(	PUNCT
fuelectenerg-7534	478	25	6	6	NUM
fuelectenerg-7534	478	26	-	-	SYM
fuelectenerg-7534	478	27	18	18	NUM
fuelectenerg-7534	478	28	)	)	PUNCT
fuelectenerg-7534	478	29	ghz	ghz	NOUN
fuelectenerg-7534	478	30	interval	interval	NOUN
fuelectenerg-7534	478	31	and	and	CCONJ
fuelectenerg-7534	478	32	limited	limited	ADJ
fuelectenerg-7534	478	33	insertion	insertion	NOUN
fuelectenerg-7534	478	34	loss	loss	NOUN
fuelectenerg-7534	478	35	.	.	PUNCT
fuelectenerg-7534	479	1	in	in	ADP
fuelectenerg-7534	479	2	addition	addition	NOUN
fuelectenerg-7534	479	3	,	,	PUNCT
fuelectenerg-7534	479	4	the	the	DET
fuelectenerg-7534	479	5	device	device	NOUN
fuelectenerg-7534	479	6	requires	require	VERB
fuelectenerg-7534	479	7	less	less	ADJ
fuelectenerg-7534	479	8	than	than	ADP
fuelectenerg-7534	479	9	0.5	0.5	NUM
fuelectenerg-7534	479	10	v	v	NOUN
fuelectenerg-7534	479	11	for	for	ADP
fuelectenerg-7534	479	12	a	a	DET
fuelectenerg-7534	479	13	remarkably	remarkably	ADV
fuelectenerg-7534	479	14	fast	fast	ADJ
fuelectenerg-7534	479	15	actuation	actuation	NOUN
fuelectenerg-7534	479	16	(	(	PUNCT
fuelectenerg-7534	479	17	1	1	NUM
fuelectenerg-7534	479	18	μs	μs	NUM
fuelectenerg-7534	479	19	)	)	PUNCT
fuelectenerg-7534	479	20	.	.	PUNCT
fuelectenerg-7534	480	1	a	a	DET
fuelectenerg-7534	480	2	more	more	ADV
fuelectenerg-7534	480	3	traditional	traditional	ADJ
fuelectenerg-7534	480	4	filter	filter	NOUN
fuelectenerg-7534	480	5	based	base	VERB
fuelectenerg-7534	480	6	on	on	ADP
fuelectenerg-7534	480	7	cavity	cavity	NOUN
fuelectenerg-7534	480	8	and	and	CCONJ
fuelectenerg-7534	480	9	posts	post	NOUN
fuelectenerg-7534	480	10	is	be	AUX
fuelectenerg-7534	480	11	described	describe	VERB
fuelectenerg-7534	480	12	in	in	ADP
fuelectenerg-7534	480	13	[	[	X
fuelectenerg-7534	480	14	113	113	NUM
fuelectenerg-7534	480	15	]	]	PUNCT
fuelectenerg-7534	480	16	,	,	PUNCT
fuelectenerg-7534	480	17	whose	whose	DET
fuelectenerg-7534	480	18	tuning	tuning	NOUN
fuelectenerg-7534	480	19	principle	principle	NOUN
fuelectenerg-7534	480	20	is	be	AUX
fuelectenerg-7534	480	21	utilized	utilize	VERB
fuelectenerg-7534	480	22	in	in	ADP
fuelectenerg-7534	480	23	commercial	commercial	ADJ
fuelectenerg-7534	480	24	omron	omron	PROPN
fuelectenerg-7534	480	25	mems	mems	PROPN
fuelectenerg-7534	480	26	switches	switch	NOUN
fuelectenerg-7534	480	27	;	;	PUNCT
fuelectenerg-7534	480	28	switches	switch	NOUN
fuelectenerg-7534	480	29	may	may	AUX
fuelectenerg-7534	480	30	establish	establish	VERB
fuelectenerg-7534	480	31	or	or	CCONJ
fuelectenerg-7534	480	32	avoid	avoid	VERB
fuelectenerg-7534	480	33	the	the	DET
fuelectenerg-7534	480	34	connection	connection	NOUN
fuelectenerg-7534	480	35	to	to	PART
fuelectenerg-7534	480	36	ground	ground	VERB
fuelectenerg-7534	480	37	for	for	ADP
fuelectenerg-7534	480	38	a	a	DET
fuelectenerg-7534	480	39	couple	couple	NOUN
fuelectenerg-7534	480	40	of	of	ADP
fuelectenerg-7534	480	41	striplines	stripline	NOUN
fuelectenerg-7534	480	42	inserted	insert	VERB
fuelectenerg-7534	480	43	in	in	ADP
fuelectenerg-7534	480	44	the	the	DET
fuelectenerg-7534	480	45	cavity	cavity	NOUN
fuelectenerg-7534	480	46	,	,	PUNCT
fuelectenerg-7534	480	47	fed	feed	VERB
fuelectenerg-7534	480	48	by	by	ADP
fuelectenerg-7534	480	49	common	common	ADJ
fuelectenerg-7534	480	50	subminiature	subminiature	NOUN
fuelectenerg-7534	480	51	-	-	PUNCT
fuelectenerg-7534	480	52	version	version	NOUN
fuelectenerg-7534	480	53	-	-	PUNCT
fuelectenerg-7534	480	54	a	a	PRON
fuelectenerg-7534	480	55	(	(	PUNCT
fuelectenerg-7534	480	56	sma	sma	NOUN
fuelectenerg-7534	480	57	)	)	PUNCT
fuelectenerg-7534	480	58	probes	probe	NOUN
fuelectenerg-7534	480	59	.	.	PUNCT
fuelectenerg-7534	481	1	the	the	DET
fuelectenerg-7534	481	2	absence	absence	NOUN
fuelectenerg-7534	481	3	of	of	ADP
fuelectenerg-7534	481	4	lumped	lump	VERB
fuelectenerg-7534	481	5	components	component	NOUN
fuelectenerg-7534	481	6	allowed	allow	VERB
fuelectenerg-7534	481	7	the	the	DET
fuelectenerg-7534	481	8	authors	author	NOUN
fuelectenerg-7534	481	9	to	to	PART
fuelectenerg-7534	481	10	avoid	avoid	VERB
fuelectenerg-7534	481	11	undesired	undesired	ADJ
fuelectenerg-7534	481	12	degradation	degradation	NOUN
fuelectenerg-7534	481	13	of	of	ADP
fuelectenerg-7534	481	14	the	the	DET
fuelectenerg-7534	481	15	high	high	ADJ
fuelectenerg-7534	481	16	q	q	NOUN
fuelectenerg-7534	481	17	factor	factor	NOUN
fuelectenerg-7534	481	18	for	for	ADP
fuelectenerg-7534	481	19	this	this	DET
fuelectenerg-7534	481	20	2	2	NUM
fuelectenerg-7534	481	21	-	-	PUNCT
fuelectenerg-7534	481	22	bit	bit	NOUN
fuelectenerg-7534	481	23	device	device	NOUN
fuelectenerg-7534	481	24	,	,	PUNCT
fuelectenerg-7534	481	25	greater	great	ADJ
fuelectenerg-7534	481	26	than	than	ADP
fuelectenerg-7534	481	27	2000	2000	NUM
fuelectenerg-7534	481	28	for	for	ADP
fuelectenerg-7534	481	29	all	all	DET
fuelectenerg-7534	481	30	the	the	DET
fuelectenerg-7534	481	31	tuning	tuning	NOUN
fuelectenerg-7534	481	32	states	state	NOUN
fuelectenerg-7534	481	33	.	.	PUNCT
fuelectenerg-7534	482	1	designed	design	VERB
fuelectenerg-7534	482	2	for	for	ADP
fuelectenerg-7534	482	3	c	c	PROPN
fuelectenerg-7534	482	4	band	band	NOUN
fuelectenerg-7534	482	5	applications	application	NOUN
fuelectenerg-7534	482	6	,	,	PUNCT
fuelectenerg-7534	482	7	the	the	DET
fuelectenerg-7534	482	8	filter	filter	NOUN
fuelectenerg-7534	482	9	demonstrated	demonstrate	VERB
fuelectenerg-7534	482	10	minimal	minimal	ADJ
fuelectenerg-7534	482	11	insertion	insertion	NOUN
fuelectenerg-7534	482	12	loss	loss	NOUN
fuelectenerg-7534	482	13	(	(	PUNCT
fuelectenerg-7534	482	14	<	<	X
fuelectenerg-7534	482	15	-0.44	-0.44	NUM
fuelectenerg-7534	482	16	db	db	NOUN
fuelectenerg-7534	482	17	)	)	PUNCT
fuelectenerg-7534	482	18	within	within	ADP
fuelectenerg-7534	482	19	a	a	DET
fuelectenerg-7534	482	20	relatively	relatively	ADV
fuelectenerg-7534	482	21	limited	limited	ADJ
fuelectenerg-7534	482	22	530	530	NUM
fuelectenerg-7534	482	23	mhz	mhz	ADJ
fuelectenerg-7534	482	24	tuning	tuning	NOUN
fuelectenerg-7534	482	25	range	range	NOUN
fuelectenerg-7534	482	26	in	in	ADP
fuelectenerg-7534	482	27	the	the	DET
fuelectenerg-7534	482	28	vicinity	vicinity	NOUN
fuelectenerg-7534	482	29	of	of	ADP
fuelectenerg-7534	482	30	the	the	DET
fuelectenerg-7534	482	31	designed	design	VERB
fuelectenerg-7534	482	32	frequency	frequency	NOUN
fuelectenerg-7534	482	33	of	of	ADP
fuelectenerg-7534	482	34	7	7	NUM
fuelectenerg-7534	482	35	ghz	ghz	NOUN
fuelectenerg-7534	482	36	.	.	PUNCT
fuelectenerg-7534	483	1	regarding	regard	VERB
fuelectenerg-7534	483	2	resonators	resonator	NOUN
fuelectenerg-7534	483	3	based	base	VERB
fuelectenerg-7534	483	4	on	on	ADP
fuelectenerg-7534	483	5	siw	siw	PROPN
fuelectenerg-7534	483	6	,	,	PUNCT
fuelectenerg-7534	483	7	[	[	X
fuelectenerg-7534	483	8	114	114	NUM
fuelectenerg-7534	483	9	]	]	PUNCT
fuelectenerg-7534	483	10	proposes	propose	VERB
fuelectenerg-7534	483	11	a	a	DET
fuelectenerg-7534	483	12	couple	couple	NOUN
fuelectenerg-7534	483	13	of	of	ADP
fuelectenerg-7534	483	14	realizations	realization	NOUN
fuelectenerg-7534	483	15	,	,	PUNCT
fuelectenerg-7534	483	16	employing	employ	VERB
fuelectenerg-7534	483	17	folded	fold	VERB
fuelectenerg-7534	483	18	-	-	PUNCT
fuelectenerg-7534	483	19	ridged	ridge	VERB
fuelectenerg-7534	483	20	quarter	quarter	NOUN
fuelectenerg-7534	483	21	-	-	PUNCT
fuelectenerg-7534	483	22	mode	mode	NOUN
fuelectenerg-7534	483	23	siw	siw	NOUN
fuelectenerg-7534	483	24	resonators	resonator	NOUN
fuelectenerg-7534	483	25	,	,	PUNCT
fuelectenerg-7534	483	26	and	and	CCONJ
fuelectenerg-7534	483	27	operating	operate	VERB
fuelectenerg-7534	483	28	at	at	ADP
fuelectenerg-7534	483	29	l	l	PROPN
fuelectenerg-7534	483	30	and	and	CCONJ
fuelectenerg-7534	483	31	s	s	NOUN
fuelectenerg-7534	483	32	bands	band	NOUN
fuelectenerg-7534	483	33	.	.	PUNCT
fuelectenerg-7534	484	1	in	in	ADP
fuelectenerg-7534	484	2	both	both	CCONJ
fuelectenerg-7534	484	3	the	the	DET
fuelectenerg-7534	484	4	bandpass	bandpass	NOUN
fuelectenerg-7534	484	5	realizations	realization	NOUN
fuelectenerg-7534	484	6	,	,	PUNCT
fuelectenerg-7534	484	7	the	the	DET
fuelectenerg-7534	484	8	tuning	tuning	NOUN
fuelectenerg-7534	484	9	mechanism	mechanism	NOUN
fuelectenerg-7534	484	10	comprises	comprise	VERB
fuelectenerg-7534	484	11	a	a	DET
fuelectenerg-7534	484	12	couple	couple	NOUN
fuelectenerg-7534	484	13	of	of	ADP
fuelectenerg-7534	484	14	commercial	commercial	ADJ
fuelectenerg-7534	484	15	sp4	sp4	PROPN
fuelectenerg-7534	484	16	t	t	PROPN
fuelectenerg-7534	484	17	rfmems	rfmem	NOUN
fuelectenerg-7534	484	18	switches	switch	NOUN
fuelectenerg-7534	484	19	,	,	PUNCT
fuelectenerg-7534	484	20	selecting	select	VERB
fuelectenerg-7534	484	21	lumped	lump	VERB
fuelectenerg-7534	484	22	reactive	reactive	ADJ
fuelectenerg-7534	484	23	loads	load	NOUN
fuelectenerg-7534	484	24	,	,	PUNCT
fuelectenerg-7534	484	25	while	while	SCONJ
fuelectenerg-7534	484	26	the	the	DET
fuelectenerg-7534	484	27	two	two	NUM
fuelectenerg-7534	484	28	-	-	PUNCT
fuelectenerg-7534	484	29	pole	pole	NOUN
fuelectenerg-7534	484	30	resonator	resonator	NOUN
fuelectenerg-7534	484	31	is	be	AUX
fuelectenerg-7534	484	32	represented	represent	VERB
fuelectenerg-7534	484	33	by	by	ADP
fuelectenerg-7534	484	34	two	two	NUM
fuelectenerg-7534	484	35	folded	fold	VERB
fuelectenerg-7534	484	36	-	-	PUNCT
fuelectenerg-7534	484	37	ridged	ridge	VERB
fuelectenerg-7534	484	38	siw	siw	NOUN
fuelectenerg-7534	484	39	cavities	cavity	NOUN
fuelectenerg-7534	484	40	coupled	couple	VERB
fuelectenerg-7534	484	41	by	by	ADP
fuelectenerg-7534	484	42	a	a	DET
fuelectenerg-7534	484	43	iris	iris	NOUN
fuelectenerg-7534	484	44	opening	opening	NOUN
fuelectenerg-7534	484	45	.	.	PUNCT
fuelectenerg-7534	485	1	a	a	DET
fuelectenerg-7534	485	2	quarter	quarter	NOUN
fuelectenerg-7534	485	3	-	-	PUNCT
fuelectenerg-7534	485	4	mode	mode	NOUN
fuelectenerg-7534	485	5	resonator	resonator	NOUN
fuelectenerg-7534	485	6	siw	siw	NOUN
fuelectenerg-7534	485	7	is	be	AUX
fuelectenerg-7534	485	8	obtained	obtain	VERB
fuelectenerg-7534	485	9	by	by	ADP
fuelectenerg-7534	485	10	cutting	cut	VERB
fuelectenerg-7534	485	11	a	a	DET
fuelectenerg-7534	485	12	siw	siw	NOUN
fuelectenerg-7534	485	13	waveguide	waveguide	NOUN
fuelectenerg-7534	485	14	along	along	ADP
fuelectenerg-7534	485	15	a	a	DET
fuelectenerg-7534	485	16	plane	plane	NOUN
fuelectenerg-7534	485	17	of	of	ADP
fuelectenerg-7534	485	18	symmetry	symmetry	NOUN
fuelectenerg-7534	485	19	of	of	ADP
fuelectenerg-7534	485	20	the	the	DET
fuelectenerg-7534	485	21	resonance	resonance	NOUN
fuelectenerg-7534	485	22	associated	associate	VERB
fuelectenerg-7534	485	23	with	with	ADP
fuelectenerg-7534	485	24	its	its	PRON
fuelectenerg-7534	485	25	fundamental	fundamental	ADJ
fuelectenerg-7534	485	26	mode	mode	NOUN
fuelectenerg-7534	485	27	.	.	PUNCT
fuelectenerg-7534	486	1	this	this	DET
fuelectenerg-7534	486	2	strategy	strategy	NOUN
fuelectenerg-7534	486	3	enabled	enable	VERB
fuelectenerg-7534	486	4	a	a	DET
fuelectenerg-7534	486	5	substantial	substantial	ADJ
fuelectenerg-7534	486	6	miniaturization	miniaturization	NOUN
fuelectenerg-7534	486	7	of	of	ADP
fuelectenerg-7534	486	8	a	a	DET
fuelectenerg-7534	486	9	single	single	ADJ
fuelectenerg-7534	486	10	siw	siw	NOUN
fuelectenerg-7534	486	11	-	-	PUNCT
fuelectenerg-7534	486	12	based	base	VERB
fuelectenerg-7534	486	13	resonator	resonator	NOUN
fuelectenerg-7534	486	14	,	,	PUNCT
fuelectenerg-7534	486	15	featuring	feature	VERB
fuelectenerg-7534	486	16	a	a	DET
fuelectenerg-7534	486	17	λ/16	λ/16	NOUN
fuelectenerg-7534	486	18	transverse	transverse	NOUN
fuelectenerg-7534	486	19	width	width	NOUN
fuelectenerg-7534	486	20	as	as	ADP
fuelectenerg-7534	486	21	compared	compare	VERB
fuelectenerg-7534	486	22	to	to	ADP
fuelectenerg-7534	486	23	the	the	DET
fuelectenerg-7534	486	24	reported	reported	ADJ
fuelectenerg-7534	486	25	state	state	NOUN
fuelectenerg-7534	486	26	of	of	ADP
fuelectenerg-7534	486	27	the	the	DET
fuelectenerg-7534	486	28	art	art	NOUN
fuelectenerg-7534	486	29	regarding	regard	VERB
fuelectenerg-7534	486	30	such	such	ADJ
fuelectenerg-7534	486	31	devices	device	NOUN
fuelectenerg-7534	486	32	.	.	PUNCT
fuelectenerg-7534	487	1	in	in	ADP
fuelectenerg-7534	487	2	terms	term	NOUN
fuelectenerg-7534	487	3	of	of	ADP
fuelectenerg-7534	487	4	electrical	electrical	ADJ
fuelectenerg-7534	487	5	performance	performance	NOUN
fuelectenerg-7534	487	6	,	,	PUNCT
fuelectenerg-7534	487	7	the	the	DET
fuelectenerg-7534	487	8	filter	filter	NOUN
fuelectenerg-7534	487	9	equipped	equip	VERB
fuelectenerg-7534	487	10	358	358	NUM
fuelectenerg-7534	487	11	g.	g.	NOUN
fuelectenerg-7534	487	12	tagliapietra	tagliapietra	PROPN
fuelectenerg-7534	487	13	,	,	PUNCT
fuelectenerg-7534	487	14	j.	j.	PROPN
fuelectenerg-7534	487	15	iannacci	iannacci	PROPN
fuelectenerg-7534	487	16	with	with	ADP
fuelectenerg-7534	487	17	capacitive	capacitive	ADJ
fuelectenerg-7534	487	18	loads	load	NOUN
fuelectenerg-7534	487	19	exhibits	exhibit	VERB
fuelectenerg-7534	487	20	reasonable	reasonable	ADJ
fuelectenerg-7534	487	21	insertion	insertion	NOUN
fuelectenerg-7534	487	22	and	and	CCONJ
fuelectenerg-7534	487	23	return	return	VERB
fuelectenerg-7534	487	24	loss	loss	NOUN
fuelectenerg-7534	487	25	along	along	ADP
fuelectenerg-7534	487	26	its	its	PRON
fuelectenerg-7534	487	27	eight	eight	NUM
fuelectenerg-7534	487	28	tuning	tuning	NOUN
fuelectenerg-7534	487	29	states	state	NOUN
fuelectenerg-7534	487	30	,	,	PUNCT
fuelectenerg-7534	487	31	providing	provide	VERB
fuelectenerg-7534	487	32	a	a	DET
fuelectenerg-7534	487	33	305	305	NUM
fuelectenerg-7534	487	34	mhz	mhz	NOUN
fuelectenerg-7534	487	35	tuning	tuning	NOUN
fuelectenerg-7534	487	36	range	range	NOUN
fuelectenerg-7534	487	37	in	in	ADP
fuelectenerg-7534	487	38	the	the	DET
fuelectenerg-7534	487	39	vicinity	vicinity	NOUN
fuelectenerg-7534	487	40	of	of	ADP
fuelectenerg-7534	487	41	the	the	DET
fuelectenerg-7534	487	42	center	center	ADJ
fuelectenerg-7534	487	43	operational	operational	ADJ
fuelectenerg-7534	487	44	frequency	frequency	NOUN
fuelectenerg-7534	487	45	(	(	PUNCT
fuelectenerg-7534	487	46	865	865	NUM
fuelectenerg-7534	487	47	mhz	mhz	NOUN
fuelectenerg-7534	487	48	)	)	PUNCT
fuelectenerg-7534	487	49	.	.	PUNCT
fuelectenerg-7534	488	1	another	another	DET
fuelectenerg-7534	488	2	interesting	interesting	ADJ
fuelectenerg-7534	488	3	implementation	implementation	NOUN
fuelectenerg-7534	488	4	is	be	AUX
fuelectenerg-7534	488	5	described	describe	VERB
fuelectenerg-7534	488	6	in	in	ADP
fuelectenerg-7534	488	7	[	[	X
fuelectenerg-7534	488	8	115	115	NUM
fuelectenerg-7534	488	9	]	]	PUNCT
fuelectenerg-7534	488	10	,	,	PUNCT
fuelectenerg-7534	488	11	involving	involve	VERB
fuelectenerg-7534	488	12	a	a	DET
fuelectenerg-7534	488	13	half	half	ADJ
fuelectenerg-7534	488	14	-	-	PUNCT
fuelectenerg-7534	488	15	mode	mode	NOUN
fuelectenerg-7534	488	16	siw	siw	NOUN
fuelectenerg-7534	488	17	resonator	resonator	NOUN
fuelectenerg-7534	488	18	loaded	load	VERB
fuelectenerg-7534	488	19	by	by	ADP
fuelectenerg-7534	488	20	a	a	DET
fuelectenerg-7534	488	21	complementary	complementary	ADJ
fuelectenerg-7534	488	22	split	split	NOUN
fuelectenerg-7534	488	23	ring	ring	NOUN
fuelectenerg-7534	488	24	resonator	resonator	NOUN
fuelectenerg-7534	488	25	(	(	PUNCT
fuelectenerg-7534	488	26	csrr	csrr	ADV
fuelectenerg-7534	488	27	)	)	PUNCT
fuelectenerg-7534	488	28	and	and	CCONJ
fuelectenerg-7534	488	29	a	a	DET
fuelectenerg-7534	488	30	mems	mem	NOUN
fuelectenerg-7534	488	31	movable	movable	ADJ
fuelectenerg-7534	488	32	membrane	membrane	NOUN
fuelectenerg-7534	488	33	.	.	PUNCT
fuelectenerg-7534	489	1	in	in	ADP
fuelectenerg-7534	489	2	this	this	DET
fuelectenerg-7534	489	3	arrangement	arrangement	NOUN
fuelectenerg-7534	489	4	,	,	PUNCT
fuelectenerg-7534	489	5	the	the	DET
fuelectenerg-7534	489	6	csrr	csrr	ADJ
fuelectenerg-7534	489	7	in	in	ADP
fuelectenerg-7534	489	8	engraved	engrave	VERB
fuelectenerg-7534	489	9	on	on	ADP
fuelectenerg-7534	489	10	top	top	NOUN
fuelectenerg-7534	489	11	of	of	ADP
fuelectenerg-7534	489	12	the	the	DET
fuelectenerg-7534	489	13	6x6	6x6	NUM
fuelectenerg-7534	489	14	mm2	mm2	NOUN
fuelectenerg-7534	489	15	half	half	PROPN
fuelectenerg-7534	489	16	mode	mode	PROPN
fuelectenerg-7534	489	17	siw	siw	PROPN
fuelectenerg-7534	489	18	,	,	PUNCT
fuelectenerg-7534	489	19	and	and	CCONJ
fuelectenerg-7534	489	20	an	an	DET
fuelectenerg-7534	489	21	overhead	overhead	ADJ
fuelectenerg-7534	489	22	metallic	metallic	ADJ
fuelectenerg-7534	489	23	movable	movable	ADJ
fuelectenerg-7534	489	24	membrane	membrane	NOUN
fuelectenerg-7534	489	25	realizes	realize	VERB
fuelectenerg-7534	489	26	the	the	DET
fuelectenerg-7534	489	27	tuning	tuning	NOUN
fuelectenerg-7534	489	28	,	,	PUNCT
fuelectenerg-7534	489	29	acting	act	VERB
fuelectenerg-7534	489	30	as	as	ADP
fuelectenerg-7534	489	31	variable	variable	ADJ
fuelectenerg-7534	489	32	capacitance	capacitance	NOUN
fuelectenerg-7534	489	33	.	.	PUNCT
fuelectenerg-7534	490	1	this	this	DET
fuelectenerg-7534	490	2	configuration	configuration	NOUN
fuelectenerg-7534	490	3	determined	determine	VERB
fuelectenerg-7534	490	4	a	a	DET
fuelectenerg-7534	490	5	satisfying	satisfying	ADJ
fuelectenerg-7534	490	6	500	500	NUM
fuelectenerg-7534	490	7	mhz	mhz	ADJ
fuelectenerg-7534	490	8	tuning	tuning	NOUN
fuelectenerg-7534	490	9	range	range	NOUN
fuelectenerg-7534	490	10	,	,	PUNCT
fuelectenerg-7534	490	11	starting	start	VERB
fuelectenerg-7534	490	12	from	from	ADP
fuelectenerg-7534	490	13	the	the	DET
fuelectenerg-7534	490	14	basic	basic	ADJ
fuelectenerg-7534	490	15	resonant	resonant	ADJ
fuelectenerg-7534	490	16	frequency	frequency	NOUN
fuelectenerg-7534	490	17	(	(	PUNCT
fuelectenerg-7534	490	18	3.15	3.15	NUM
fuelectenerg-7534	490	19	ghz	ghz	NOUN
fuelectenerg-7534	490	20	)	)	PUNCT
fuelectenerg-7534	490	21	.	.	PUNCT
fuelectenerg-7534	491	1	in	in	ADP
fuelectenerg-7534	491	2	addition	addition	NOUN
fuelectenerg-7534	491	3	,	,	PUNCT
fuelectenerg-7534	491	4	simulations	simulation	NOUN
fuelectenerg-7534	491	5	show	show	VERB
fuelectenerg-7534	491	6	a	a	DET
fuelectenerg-7534	491	7	remarkably	remarkably	ADV
fuelectenerg-7534	491	8	small	small	ADJ
fuelectenerg-7534	491	9	insertion	insertion	NOUN
fuelectenerg-7534	491	10	loss	loss	NOUN
fuelectenerg-7534	491	11	(	(	PUNCT
fuelectenerg-7534	491	12	<	<	X
fuelectenerg-7534	491	13	-0.2	-0.2	NOUN
fuelectenerg-7534	491	14	db	db	PROPN
fuelectenerg-7534	491	15	)	)	PUNCT
fuelectenerg-7534	491	16	and	and	CCONJ
fuelectenerg-7534	491	17	appreciable	appreciable	ADJ
fuelectenerg-7534	491	18	return	return	NOUN
fuelectenerg-7534	491	19	loss	loss	NOUN
fuelectenerg-7534	491	20	(	(	PUNCT
fuelectenerg-7534	491	21	>	>	X
fuelectenerg-7534	491	22	-15	-15	NUM
fuelectenerg-7534	491	23	db	db	PROPN
fuelectenerg-7534	491	24	)	)	PUNCT
fuelectenerg-7534	491	25	for	for	ADP
fuelectenerg-7534	491	26	the	the	DET
fuelectenerg-7534	491	27	reported	report	VERB
fuelectenerg-7534	491	28	tuning	tuning	NOUN
fuelectenerg-7534	491	29	states	state	NOUN
fuelectenerg-7534	491	30	.	.	PUNCT
fuelectenerg-7534	492	1	fig	fig	NOUN
fuelectenerg-7534	492	2	.	.	PUNCT
fuelectenerg-7534	493	1	9	9	NUM
fuelectenerg-7534	493	2	(	(	PUNCT
fuelectenerg-7534	493	3	a	a	X
fuelectenerg-7534	493	4	)	)	PUNCT
fuelectenerg-7534	493	5	explanatory	explanatory	ADJ
fuelectenerg-7534	493	6	cross	cross	NOUN
fuelectenerg-7534	493	7	section	section	NOUN
fuelectenerg-7534	493	8	of	of	ADP
fuelectenerg-7534	493	9	the	the	DET
fuelectenerg-7534	493	10	eva	eva	NOUN
fuelectenerg-7534	493	11	cavities	cavity	NOUN
fuelectenerg-7534	493	12	described	describe	VERB
fuelectenerg-7534	493	13	in	in	ADP
fuelectenerg-7534	493	14	[	[	X
fuelectenerg-7534	493	15	108	108	NUM
fuelectenerg-7534	493	16	]	]	PUNCT
fuelectenerg-7534	493	17	and	and	CCONJ
fuelectenerg-7534	493	18	[	[	X
fuelectenerg-7534	493	19	109	109	NUM
fuelectenerg-7534	493	20	]	]	PUNCT
fuelectenerg-7534	493	21	,	,	PUNCT
fuelectenerg-7534	493	22	(	(	PUNCT
fuelectenerg-7534	493	23	b	b	X
fuelectenerg-7534	493	24	)	)	PUNCT
fuelectenerg-7534	493	25	3d	3d	NUM
fuelectenerg-7534	493	26	model	model	NOUN
fuelectenerg-7534	493	27	of	of	ADP
fuelectenerg-7534	493	28	the	the	DET
fuelectenerg-7534	493	29	device	device	NOUN
fuelectenerg-7534	493	30	reported	report	VERB
fuelectenerg-7534	493	31	in	in	ADP
fuelectenerg-7534	493	32	[	[	X
fuelectenerg-7534	493	33	115	115	NUM
fuelectenerg-7534	493	34	]	]	PUNCT
fuelectenerg-7534	493	35	,	,	PUNCT
fuelectenerg-7534	493	36	(	(	PUNCT
fuelectenerg-7534	493	37	c	c	X
fuelectenerg-7534	493	38	)	)	PUNCT
fuelectenerg-7534	493	39	scanning	scan	VERB
fuelectenerg-7534	493	40	electron	electron	NOUN
fuelectenerg-7534	493	41	microscope	microscope	NOUN
fuelectenerg-7534	493	42	(	(	PUNCT
fuelectenerg-7534	493	43	sem	sem	NOUN
fuelectenerg-7534	493	44	)	)	PUNCT
fuelectenerg-7534	493	45	photography	photography	NOUN
fuelectenerg-7534	493	46	of	of	ADP
fuelectenerg-7534	493	47	the	the	DET
fuelectenerg-7534	493	48	layout	layout	NOUN
fuelectenerg-7534	493	49	realized	realize	VERB
fuelectenerg-7534	493	50	in	in	ADP
fuelectenerg-7534	493	51	[	[	X
fuelectenerg-7534	493	52	116	116	NUM
fuelectenerg-7534	493	53	]	]	PUNCT
fuelectenerg-7534	493	54	.	.	PUNCT
fuelectenerg-7534	494	1	6.2	6.2	NUM
fuelectenerg-7534	494	2	.	.	PUNCT
fuelectenerg-7534	495	1	planar	planar	ADJ
fuelectenerg-7534	495	2	structures	structure	NOUN
fuelectenerg-7534	495	3	regarding	regard	VERB
fuelectenerg-7534	495	4	filters	filter	NOUN
fuelectenerg-7534	495	5	based	base	VERB
fuelectenerg-7534	495	6	on	on	ADP
fuelectenerg-7534	495	7	planar	planar	ADJ
fuelectenerg-7534	495	8	structures	structure	NOUN
fuelectenerg-7534	495	9	,	,	PUNCT
fuelectenerg-7534	495	10	the	the	DET
fuelectenerg-7534	495	11	first	first	ADJ
fuelectenerg-7534	495	12	proposed	propose	VERB
fuelectenerg-7534	495	13	device	device	NOUN
fuelectenerg-7534	496	1	[	[	X
fuelectenerg-7534	496	2	116	116	X
fuelectenerg-7534	496	3	]	]	PUNCT
fuelectenerg-7534	496	4	is	be	AUX
fuelectenerg-7534	496	5	a	a	DET
fuelectenerg-7534	496	6	tunable	tunable	ADJ
fuelectenerg-7534	496	7	bandstop	bandstop	NOUN
fuelectenerg-7534	496	8	filter	filter	NOUN
fuelectenerg-7534	496	9	for	for	ADP
fuelectenerg-7534	496	10	ka	ka	NOUN
fuelectenerg-7534	496	11	-	-	PUNCT
fuelectenerg-7534	496	12	band	band	NOUN
fuelectenerg-7534	496	13	applications	application	NOUN
fuelectenerg-7534	496	14	,	,	PUNCT
fuelectenerg-7534	496	15	realized	realize	VERB
fuelectenerg-7534	496	16	in	in	ADP
fuelectenerg-7534	496	17	cpw	cpw	NOUN
fuelectenerg-7534	496	18	configuration	configuration	NOUN
fuelectenerg-7534	496	19	.	.	PUNCT
fuelectenerg-7534	497	1	the	the	DET
fuelectenerg-7534	497	2	resonance	resonance	NOUN
fuelectenerg-7534	497	3	is	be	AUX
fuelectenerg-7534	497	4	achieved	achieve	VERB
fuelectenerg-7534	497	5	by	by	ADP
fuelectenerg-7534	497	6	arranging	arrange	VERB
fuelectenerg-7534	497	7	a	a	DET
fuelectenerg-7534	497	8	csrr	csrr	ADJ
fuelectenerg-7534	497	9	both	both	PRON
fuelectenerg-7534	497	10	on	on	ADP
fuelectenerg-7534	497	11	the	the	DET
fuelectenerg-7534	497	12	signal	signal	ADJ
fuelectenerg-7534	497	13	line	line	NOUN
fuelectenerg-7534	497	14	and	and	CCONJ
fuelectenerg-7534	497	15	ground	ground	NOUN
fuelectenerg-7534	497	16	sides	side	NOUN
fuelectenerg-7534	497	17	.	.	PUNCT
fuelectenerg-7534	498	1	the	the	DET
fuelectenerg-7534	498	2	default	default	NOUN
fuelectenerg-7534	498	3	resonance	resonance	NOUN
fuelectenerg-7534	498	4	frequency	frequency	NOUN
fuelectenerg-7534	498	5	(	(	PUNCT
fuelectenerg-7534	498	6	38.8	38.8	NUM
fuelectenerg-7534	498	7	ghz	ghz	NOUN
fuelectenerg-7534	498	8	)	)	PUNCT
fuelectenerg-7534	498	9	can	can	AUX
fuelectenerg-7534	498	10	be	be	AUX
fuelectenerg-7534	498	11	shifted	shift	VERB
fuelectenerg-7534	498	12	to	to	ADP
fuelectenerg-7534	498	13	35.32	35.32	NUM
fuelectenerg-7534	498	14	ghz	ghz	NOUN
fuelectenerg-7534	498	15	by	by	ADP
fuelectenerg-7534	498	16	the	the	DET
fuelectenerg-7534	498	17	activation	activation	NOUN
fuelectenerg-7534	498	18	of	of	ADP
fuelectenerg-7534	498	19	three	three	NUM
fuelectenerg-7534	498	20	movable	movable	ADJ
fuelectenerg-7534	498	21	membranes	membrane	NOUN
fuelectenerg-7534	498	22	on	on	ADP
fuelectenerg-7534	498	23	top	top	NOUN
fuelectenerg-7534	498	24	of	of	ADP
fuelectenerg-7534	498	25	the	the	DET
fuelectenerg-7534	498	26	resonator	resonator	NOUN
fuelectenerg-7534	498	27	engraved	engrave	VERB
fuelectenerg-7534	498	28	on	on	ADP
fuelectenerg-7534	498	29	the	the	DET
fuelectenerg-7534	498	30	signal	signal	ADJ
fuelectenerg-7534	498	31	line	line	NOUN
fuelectenerg-7534	498	32	,	,	PUNCT
fuelectenerg-7534	498	33	letting	let	VERB
fuelectenerg-7534	498	34	(	(	PUNCT
fuelectenerg-7534	498	35	a	a	NOUN
fuelectenerg-7534	498	36	)	)	PUNCT
fuelectenerg-7534	498	37	(	(	PUNCT
fuelectenerg-7534	498	38	b	b	X
fuelectenerg-7534	498	39	)	)	PUNCT
fuelectenerg-7534	498	40	(	(	PUNCT
fuelectenerg-7534	498	41	c	c	X
fuelectenerg-7534	498	42	)	)	PUNCT
fuelectenerg-7534	498	43	a	a	DET
fuelectenerg-7534	498	44	comprehensive	comprehensive	ADJ
fuelectenerg-7534	498	45	overview	overview	NOUN
fuelectenerg-7534	498	46	of	of	ADP
fuelectenerg-7534	498	47	recent	recent	ADJ
fuelectenerg-7534	498	48	developments	development	NOUN
fuelectenerg-7534	498	49	in	in	ADP
fuelectenerg-7534	498	50	rf	rf	ADJ
fuelectenerg-7534	498	51	-	-	PUNCT
fuelectenerg-7534	498	52	mems	mems	ADJ
fuelectenerg-7534	498	53	technology	technology	NOUN
fuelectenerg-7534	498	54	359	359	NUM
fuelectenerg-7534	498	55	them	they	PRON
fuelectenerg-7534	498	56	act	act	VERB
fuelectenerg-7534	498	57	as	as	ADP
fuelectenerg-7534	498	58	varactors	varactor	NOUN
fuelectenerg-7534	498	59	.	.	PUNCT
fuelectenerg-7534	499	1	the	the	DET
fuelectenerg-7534	499	2	novelty	novelty	NOUN
fuelectenerg-7534	499	3	of	of	ADP
fuelectenerg-7534	499	4	this	this	DET
fuelectenerg-7534	499	5	research	research	NOUN
fuelectenerg-7534	499	6	contribution	contribution	NOUN
fuelectenerg-7534	499	7	is	be	AUX
fuelectenerg-7534	499	8	represented	represent	VERB
fuelectenerg-7534	499	9	by	by	ADP
fuelectenerg-7534	499	10	the	the	DET
fuelectenerg-7534	499	11	fact	fact	NOUN
fuelectenerg-7534	499	12	of	of	ADP
fuelectenerg-7534	499	13	being	be	AUX
fuelectenerg-7534	499	14	the	the	DET
fuelectenerg-7534	499	15	first	first	ADJ
fuelectenerg-7534	499	16	proposal	proposal	NOUN
fuelectenerg-7534	499	17	for	for	ADP
fuelectenerg-7534	499	18	cpw	cpw	NOUN
fuelectenerg-7534	499	19	filter	filter	NOUN
fuelectenerg-7534	499	20	based	base	VERB
fuelectenerg-7534	499	21	on	on	ADP
fuelectenerg-7534	499	22	csrr	csrr	ADJ
fuelectenerg-7534	499	23	,	,	PUNCT
fuelectenerg-7534	499	24	compatible	compatible	ADJ
fuelectenerg-7534	499	25	with	with	ADP
fuelectenerg-7534	499	26	cmos	cmos	PROPN
fuelectenerg-7534	499	27	technology	technology	NOUN
fuelectenerg-7534	499	28	.	.	PUNCT
fuelectenerg-7534	500	1	the	the	DET
fuelectenerg-7534	500	2	device	device	NOUN
fuelectenerg-7534	500	3	,	,	PUNCT
fuelectenerg-7534	500	4	featuring	feature	VERB
fuelectenerg-7534	500	5	a	a	DET
fuelectenerg-7534	500	6	gold	gold	ADJ
fuelectenerg-7534	500	7	metallization	metallization	NOUN
fuelectenerg-7534	500	8	on	on	ADP
fuelectenerg-7534	500	9	a	a	DET
fuelectenerg-7534	500	10	silicon	silicon	NOUN
fuelectenerg-7534	500	11	substrate	substrate	NOUN
fuelectenerg-7534	500	12	is	be	AUX
fuelectenerg-7534	500	13	remarkable	remarkable	ADJ
fuelectenerg-7534	500	14	also	also	ADV
fuelectenerg-7534	500	15	in	in	ADP
fuelectenerg-7534	500	16	terms	term	NOUN
fuelectenerg-7534	500	17	of	of	ADP
fuelectenerg-7534	500	18	dimensions	dimension	NOUN
fuelectenerg-7534	500	19	,	,	PUNCT
fuelectenerg-7534	500	20	not	not	PART
fuelectenerg-7534	500	21	exceeding	exceed	VERB
fuelectenerg-7534	500	22	1.46x5	1.46x5	NUM
fuelectenerg-7534	500	23	mm2	mm2	NOUN
fuelectenerg-7534	500	24	.	.	PUNCT
fuelectenerg-7534	501	1	the	the	DET
fuelectenerg-7534	501	2	same	same	ADJ
fuelectenerg-7534	501	3	frequency	frequency	NOUN
fuelectenerg-7534	501	4	band	band	NOUN
fuelectenerg-7534	501	5	is	be	AUX
fuelectenerg-7534	501	6	targeted	target	VERB
fuelectenerg-7534	501	7	in	in	ADP
fuelectenerg-7534	501	8	[	[	X
fuelectenerg-7534	501	9	117	117	NUM
fuelectenerg-7534	501	10	]	]	PUNCT
fuelectenerg-7534	501	11	,	,	PUNCT
fuelectenerg-7534	501	12	in	in	ADP
fuelectenerg-7534	501	13	which	which	PRON
fuelectenerg-7534	501	14	a	a	DET
fuelectenerg-7534	501	15	bandstop	bandstop	NOUN
fuelectenerg-7534	501	16	filter	filter	NOUN
fuelectenerg-7534	501	17	based	base	VERB
fuelectenerg-7534	501	18	on	on	ADP
fuelectenerg-7534	501	19	shape	shape	NOUN
fuelectenerg-7534	501	20	defected	defect	VERB
fuelectenerg-7534	501	21	ground	ground	NOUN
fuelectenerg-7534	501	22	(	(	PUNCT
fuelectenerg-7534	501	23	sdg	sdg	NOUN
fuelectenerg-7534	501	24	)	)	PUNCT
fuelectenerg-7534	501	25	is	be	AUX
fuelectenerg-7534	501	26	presented	present	VERB
fuelectenerg-7534	501	27	.	.	PUNCT
fuelectenerg-7534	502	1	more	more	ADV
fuelectenerg-7534	502	2	specifically	specifically	ADV
fuelectenerg-7534	502	3	,	,	PUNCT
fuelectenerg-7534	502	4	the	the	DET
fuelectenerg-7534	502	5	device	device	NOUN
fuelectenerg-7534	502	6	consists	consist	VERB
fuelectenerg-7534	502	7	in	in	ADP
fuelectenerg-7534	502	8	a	a	DET
fuelectenerg-7534	502	9	cpw	cpw	NOUN
fuelectenerg-7534	502	10	configuration	configuration	NOUN
fuelectenerg-7534	502	11	,	,	PUNCT
fuelectenerg-7534	502	12	periodically	periodically	ADV
fuelectenerg-7534	502	13	loaded	load	VERB
fuelectenerg-7534	502	14	by	by	ADP
fuelectenerg-7534	502	15	four	four	NUM
fuelectenerg-7534	502	16	recesses	recess	NOUN
fuelectenerg-7534	502	17	with	with	ADP
fuelectenerg-7534	502	18	spiral	spiral	ADJ
fuelectenerg-7534	502	19	-	-	PUNCT
fuelectenerg-7534	502	20	shaped	shape	VERB
fuelectenerg-7534	502	21	metal	metal	NOUN
fuelectenerg-7534	502	22	engravings	engraving	NOUN
fuelectenerg-7534	502	23	,	,	PUNCT
fuelectenerg-7534	502	24	on	on	ADP
fuelectenerg-7534	502	25	both	both	DET
fuelectenerg-7534	502	26	its	its	PRON
fuelectenerg-7534	502	27	ground	ground	NOUN
fuelectenerg-7534	502	28	planes	plane	NOUN
fuelectenerg-7534	502	29	.	.	PUNCT
fuelectenerg-7534	503	1	the	the	DET
fuelectenerg-7534	503	2	resonant	resonant	ADJ
fuelectenerg-7534	503	3	frequency	frequency	NOUN
fuelectenerg-7534	503	4	(	(	PUNCT
fuelectenerg-7534	503	5	26	26	NUM
fuelectenerg-7534	503	6	ghz	ghz	NOUN
fuelectenerg-7534	503	7	)	)	PUNCT
fuelectenerg-7534	503	8	of	of	ADP
fuelectenerg-7534	503	9	this	this	DET
fuelectenerg-7534	503	10	arrangement	arrangement	NOUN
fuelectenerg-7534	503	11	is	be	AUX
fuelectenerg-7534	503	12	controlled	control	VERB
fuelectenerg-7534	503	13	by	by	ADP
fuelectenerg-7534	503	14	a	a	DET
fuelectenerg-7534	503	15	spst	spst	PROPN
fuelectenerg-7534	503	16	rfmems	rfmem	NOUN
fuelectenerg-7534	503	17	switch	switch	VERB
fuelectenerg-7534	503	18	on	on	ADP
fuelectenerg-7534	503	19	each	each	DET
fuelectenerg-7534	503	20	spiral	spiral	NOUN
fuelectenerg-7534	503	21	,	,	PUNCT
fuelectenerg-7534	503	22	whose	whose	DET
fuelectenerg-7534	503	23	actuation	actuation	NOUN
fuelectenerg-7534	503	24	increases	increase	VERB
fuelectenerg-7534	503	25	the	the	DET
fuelectenerg-7534	503	26	overall	overall	ADJ
fuelectenerg-7534	503	27	length	length	NOUN
fuelectenerg-7534	503	28	of	of	ADP
fuelectenerg-7534	503	29	the	the	DET
fuelectenerg-7534	503	30	spiral	spiral	NOUN
fuelectenerg-7534	503	31	itself	itself	PRON
fuelectenerg-7534	503	32	.	.	PUNCT
fuelectenerg-7534	504	1	the	the	DET
fuelectenerg-7534	504	2	reported	report	VERB
fuelectenerg-7534	504	3	simulations	simulation	NOUN
fuelectenerg-7534	504	4	show	show	VERB
fuelectenerg-7534	504	5	an	an	DET
fuelectenerg-7534	504	6	encouraging	encouraging	ADJ
fuelectenerg-7534	504	7	3	3	NUM
fuelectenerg-7534	504	8	ghz	ghz	NOUN
fuelectenerg-7534	504	9	tuning	tuning	NOUN
fuelectenerg-7534	504	10	range	range	NOUN
fuelectenerg-7534	504	11	and	and	CCONJ
fuelectenerg-7534	504	12	a	a	DET
fuelectenerg-7534	504	13	remarkable	remarkable	ADJ
fuelectenerg-7534	504	14	stopband	stopband	NOUN
fuelectenerg-7534	504	15	attenuation	attenuation	NOUN
fuelectenerg-7534	504	16	.	.	PUNCT
fuelectenerg-7534	505	1	an	an	DET
fuelectenerg-7534	505	2	interesting	interesting	ADJ
fuelectenerg-7534	505	3	contribution	contribution	NOUN
fuelectenerg-7534	505	4	comes	come	VERB
fuelectenerg-7534	505	5	from	from	ADP
fuelectenerg-7534	505	6	[	[	X
fuelectenerg-7534	505	7	118	118	NUM
fuelectenerg-7534	505	8	]	]	PUNCT
fuelectenerg-7534	505	9	,	,	PUNCT
fuelectenerg-7534	505	10	combining	combine	VERB
fuelectenerg-7534	505	11	spurline	spurline	NOUN
fuelectenerg-7534	505	12	and	and	CCONJ
fuelectenerg-7534	505	13	dmtl	dmtl	NOUN
fuelectenerg-7534	505	14	approaches	approach	NOUN
fuelectenerg-7534	505	15	to	to	PART
fuelectenerg-7534	505	16	obtain	obtain	VERB
fuelectenerg-7534	505	17	a	a	DET
fuelectenerg-7534	505	18	tunable	tunable	ADJ
fuelectenerg-7534	505	19	bandstop	bandstop	NOUN
fuelectenerg-7534	505	20	filter	filter	NOUN
fuelectenerg-7534	505	21	working	work	VERB
fuelectenerg-7534	505	22	at	at	ADP
fuelectenerg-7534	505	23	ku	ku	PROPN
fuelectenerg-7534	505	24	band	band	PROPN
fuelectenerg-7534	505	25	.	.	PUNCT
fuelectenerg-7534	506	1	in	in	ADP
fuelectenerg-7534	506	2	spurline	spurline	NOUN
fuelectenerg-7534	506	3	-	-	PUNCT
fuelectenerg-7534	506	4	based	base	VERB
fuelectenerg-7534	506	5	filters	filter	NOUN
fuelectenerg-7534	506	6	,	,	PUNCT
fuelectenerg-7534	506	7	the	the	DET
fuelectenerg-7534	506	8	resonance	resonance	NOUN
fuelectenerg-7534	506	9	is	be	AUX
fuelectenerg-7534	506	10	achieved	achieve	VERB
fuelectenerg-7534	506	11	by	by	ADP
fuelectenerg-7534	506	12	short	short	ADJ
fuelectenerg-7534	506	13	-	-	PUNCT
fuelectenerg-7534	506	14	ended	end	VERB
fuelectenerg-7534	506	15	stubs	stub	NOUN
fuelectenerg-7534	506	16	along	along	ADP
fuelectenerg-7534	506	17	the	the	DET
fuelectenerg-7534	506	18	signal	signal	ADJ
fuelectenerg-7534	506	19	line	line	NOUN
fuelectenerg-7534	506	20	of	of	ADP
fuelectenerg-7534	506	21	a	a	DET
fuelectenerg-7534	506	22	cpw	cpw	NOUN
fuelectenerg-7534	506	23	.	.	PUNCT
fuelectenerg-7534	507	1	in	in	ADP
fuelectenerg-7534	507	2	this	this	DET
fuelectenerg-7534	507	3	case	case	NOUN
fuelectenerg-7534	507	4	,	,	PUNCT
fuelectenerg-7534	507	5	reconfigurability	reconfigurability	NOUN
fuelectenerg-7534	507	6	is	be	AUX
fuelectenerg-7534	507	7	enforced	enforce	VERB
fuelectenerg-7534	507	8	by	by	ADP
fuelectenerg-7534	507	9	shunt	shunt	NOUN
fuelectenerg-7534	507	10	capacitive	capacitive	ADJ
fuelectenerg-7534	507	11	mems	mem	NOUN
fuelectenerg-7534	507	12	switches	switch	NOUN
fuelectenerg-7534	507	13	,	,	PUNCT
fuelectenerg-7534	507	14	whose	whose	DET
fuelectenerg-7534	507	15	actuation	actuation	NOUN
fuelectenerg-7534	507	16	determines	determine	VERB
fuelectenerg-7534	507	17	a	a	DET
fuelectenerg-7534	507	18	reduced	reduced	ADJ
fuelectenerg-7534	507	19	length	length	NOUN
fuelectenerg-7534	507	20	of	of	ADP
fuelectenerg-7534	507	21	the	the	DET
fuelectenerg-7534	507	22	stubs	stub	NOUN
fuelectenerg-7534	507	23	and	and	CCONJ
fuelectenerg-7534	507	24	thus	thus	ADV
fuelectenerg-7534	507	25	a	a	DET
fuelectenerg-7534	507	26	shift	shift	NOUN
fuelectenerg-7534	507	27	in	in	ADP
fuelectenerg-7534	507	28	the	the	DET
fuelectenerg-7534	507	29	resonant	resonant	ADJ
fuelectenerg-7534	507	30	frequency	frequency	NOUN
fuelectenerg-7534	507	31	(	(	PUNCT
fuelectenerg-7534	507	32	18	18	NUM
fuelectenerg-7534	507	33	ghz	ghz	NOUN
fuelectenerg-7534	507	34	)	)	PUNCT
fuelectenerg-7534	507	35	.	.	PUNCT
fuelectenerg-7534	508	1	the	the	DET
fuelectenerg-7534	508	2	whole	whole	ADJ
fuelectenerg-7534	508	3	1.2x10	1.2x10	NUM
fuelectenerg-7534	508	4	mm2	mm2	NOUN
fuelectenerg-7534	508	5	device	device	NOUN
fuelectenerg-7534	508	6	is	be	AUX
fuelectenerg-7534	508	7	composed	compose	VERB
fuelectenerg-7534	508	8	by	by	ADP
fuelectenerg-7534	508	9	three	three	NUM
fuelectenerg-7534	508	10	sections	section	NOUN
fuelectenerg-7534	508	11	:	:	PUNCT
fuelectenerg-7534	508	12	two	two	NUM
fuelectenerg-7534	508	13	sections	section	NOUN
fuelectenerg-7534	508	14	,	,	PUNCT
fuelectenerg-7534	508	15	each	each	DET
fuelectenerg-7534	508	16	one	one	NOUN
fuelectenerg-7534	508	17	loaded	load	VERB
fuelectenerg-7534	508	18	by	by	ADP
fuelectenerg-7534	508	19	a	a	DET
fuelectenerg-7534	508	20	couple	couple	NOUN
fuelectenerg-7534	508	21	of	of	ADP
fuelectenerg-7534	508	22	stubs	stub	NOUN
fuelectenerg-7534	508	23	,	,	PUNCT
fuelectenerg-7534	508	24	and	and	CCONJ
fuelectenerg-7534	508	25	an	an	DET
fuelectenerg-7534	508	26	interposed	interposed	ADJ
fuelectenerg-7534	508	27	section	section	NOUN
fuelectenerg-7534	508	28	.	.	PUNCT
fuelectenerg-7534	509	1	in	in	ADP
fuelectenerg-7534	509	2	the	the	DET
fuelectenerg-7534	509	3	latter	latter	ADJ
fuelectenerg-7534	509	4	,	,	PUNCT
fuelectenerg-7534	509	5	the	the	DET
fuelectenerg-7534	509	6	signal	signal	ADJ
fuelectenerg-7534	509	7	line	line	NOUN
fuelectenerg-7534	509	8	is	be	AUX
fuelectenerg-7534	509	9	periodically	periodically	ADV
fuelectenerg-7534	509	10	equipped	equip	VERB
fuelectenerg-7534	509	11	with	with	ADP
fuelectenerg-7534	509	12	three	three	NUM
fuelectenerg-7534	509	13	overhead	overhead	ADJ
fuelectenerg-7534	509	14	movable	movable	ADJ
fuelectenerg-7534	509	15	mems	mem	NOUN
fuelectenerg-7534	509	16	membrane	membrane	NOUN
fuelectenerg-7534	509	17	,	,	PUNCT
fuelectenerg-7534	509	18	realizing	realize	VERB
fuelectenerg-7534	509	19	a	a	DET
fuelectenerg-7534	509	20	typical	typical	ADJ
fuelectenerg-7534	509	21	dmtl	dmtl	NOUN
fuelectenerg-7534	509	22	configuration	configuration	NOUN
fuelectenerg-7534	509	23	.	.	PUNCT
fuelectenerg-7534	510	1	the	the	DET
fuelectenerg-7534	510	2	actuation	actuation	NOUN
fuelectenerg-7534	510	3	of	of	ADP
fuelectenerg-7534	510	4	such	such	ADJ
fuelectenerg-7534	510	5	membranes	membrane	NOUN
fuelectenerg-7534	510	6	is	be	AUX
fuelectenerg-7534	510	7	intended	intend	VERB
fuelectenerg-7534	510	8	in	in	ADP
fuelectenerg-7534	510	9	order	order	NOUN
fuelectenerg-7534	510	10	to	to	PART
fuelectenerg-7534	510	11	tune	tune	VERB
fuelectenerg-7534	510	12	the	the	DET
fuelectenerg-7534	510	13	bandwidth	bandwidth	NOUN
fuelectenerg-7534	510	14	of	of	ADP
fuelectenerg-7534	510	15	the	the	DET
fuelectenerg-7534	510	16	filter	filter	NOUN
fuelectenerg-7534	510	17	,	,	PUNCT
fuelectenerg-7534	510	18	thus	thus	ADV
fuelectenerg-7534	510	19	realizing	realize	VERB
fuelectenerg-7534	510	20	a	a	DET
fuelectenerg-7534	510	21	reconfigurable	reconfigurable	ADJ
fuelectenerg-7534	510	22	device	device	NOUN
fuelectenerg-7534	510	23	both	both	CCONJ
fuelectenerg-7534	510	24	in	in	ADP
fuelectenerg-7534	510	25	terms	term	NOUN
fuelectenerg-7534	510	26	of	of	ADP
fuelectenerg-7534	510	27	frequency	frequency	NOUN
fuelectenerg-7534	510	28	and	and	CCONJ
fuelectenerg-7534	510	29	bandwidth	bandwidth	ADJ
fuelectenerg-7534	510	30	.	.	PUNCT
fuelectenerg-7534	511	1	from	from	ADP
fuelectenerg-7534	511	2	a	a	DET
fuelectenerg-7534	511	3	quantitative	quantitative	ADJ
fuelectenerg-7534	511	4	point	point	NOUN
fuelectenerg-7534	511	5	of	of	ADP
fuelectenerg-7534	511	6	view	view	NOUN
fuelectenerg-7534	511	7	,	,	PUNCT
fuelectenerg-7534	511	8	the	the	DET
fuelectenerg-7534	511	9	filter	filter	NOUN
fuelectenerg-7534	511	10	shows	show	VERB
fuelectenerg-7534	511	11	good	good	ADJ
fuelectenerg-7534	511	12	performance	performance	NOUN
fuelectenerg-7534	511	13	within	within	ADP
fuelectenerg-7534	511	14	its	its	PRON
fuelectenerg-7534	511	15	2.5	2.5	NUM
fuelectenerg-7534	511	16	ghz	ghz	NOUN
fuelectenerg-7534	511	17	tuning	tuning	NOUN
fuelectenerg-7534	511	18	range	range	NOUN
fuelectenerg-7534	511	19	;	;	PUNCT
fuelectenerg-7534	511	20	the	the	DET
fuelectenerg-7534	511	21	filter	filter	NOUN
fuelectenerg-7534	511	22	also	also	ADV
fuelectenerg-7534	511	23	provides	provide	VERB
fuelectenerg-7534	511	24	minimal	minimal	ADJ
fuelectenerg-7534	511	25	insertion	insertion	NOUN
fuelectenerg-7534	511	26	loss	loss	NOUN
fuelectenerg-7534	511	27	(	(	PUNCT
fuelectenerg-7534	511	28	<	<	X
fuelectenerg-7534	511	29	-1	-1	X
fuelectenerg-7534	511	30	db	db	NOUN
fuelectenerg-7534	511	31	)	)	PUNCT
fuelectenerg-7534	511	32	while	while	SCONJ
fuelectenerg-7534	511	33	non	non	ADJ
fuelectenerg-7534	511	34	-	-	ADJ
fuelectenerg-7534	511	35	operational	operational	ADJ
fuelectenerg-7534	511	36	,	,	PUNCT
fuelectenerg-7534	511	37	and	and	CCONJ
fuelectenerg-7534	511	38	remarkably	remarkably	ADV
fuelectenerg-7534	511	39	large	large	ADJ
fuelectenerg-7534	511	40	attenuation	attenuation	NOUN
fuelectenerg-7534	511	41	level	level	NOUN
fuelectenerg-7534	511	42	(	(	PUNCT
fuelectenerg-7534	511	43	>	>	X
fuelectenerg-7534	511	44	-70	-70	PROPN
fuelectenerg-7534	511	45	db	db	PROPN
fuelectenerg-7534	511	46	)	)	PUNCT
fuelectenerg-7534	511	47	for	for	ADP
fuelectenerg-7534	511	48	all	all	DET
fuelectenerg-7534	511	49	its	its	PRON
fuelectenerg-7534	511	50	tuning	tuning	NOUN
fuelectenerg-7534	511	51	states	state	NOUN
fuelectenerg-7534	511	52	.	.	PUNCT
fuelectenerg-7534	512	1	a	a	DET
fuelectenerg-7534	512	2	similar	similar	ADJ
fuelectenerg-7534	512	3	approach	approach	NOUN
fuelectenerg-7534	512	4	is	be	AUX
fuelectenerg-7534	512	5	adopted	adopt	VERB
fuelectenerg-7534	512	6	in	in	ADP
fuelectenerg-7534	512	7	[	[	X
fuelectenerg-7534	512	8	119	119	NUM
fuelectenerg-7534	512	9	]	]	PUNCT
fuelectenerg-7534	512	10	,	,	PUNCT
fuelectenerg-7534	512	11	with	with	ADP
fuelectenerg-7534	512	12	two	two	NUM
fuelectenerg-7534	512	13	cascaded	cascade	VERB
fuelectenerg-7534	512	14	sections	section	NOUN
fuelectenerg-7534	512	15	of	of	ADP
fuelectenerg-7534	512	16	cpw	cpw	NOUN
fuelectenerg-7534	512	17	loaded	load	VERB
fuelectenerg-7534	512	18	in	in	ADP
fuelectenerg-7534	512	19	dmtl	dmtl	NOUN
fuelectenerg-7534	512	20	fashion	fashion	NOUN
fuelectenerg-7534	512	21	,	,	PUNCT
fuelectenerg-7534	512	22	coupled	couple	VERB
fuelectenerg-7534	512	23	by	by	ADP
fuelectenerg-7534	512	24	series	series	PROPN
fuelectenerg-7534	512	25	capacitive	capacitive	ADJ
fuelectenerg-7534	512	26	rf	rf	VERB
fuelectenerg-7534	512	27	-	-	PUNCT
fuelectenerg-7534	512	28	mems	mems	ADJ
fuelectenerg-7534	512	29	switches	switch	NOUN
fuelectenerg-7534	512	30	.	.	PUNCT
fuelectenerg-7534	513	1	targeting	target	VERB
fuelectenerg-7534	513	2	c	c	NOUN
fuelectenerg-7534	513	3	band	band	NOUN
fuelectenerg-7534	513	4	and	and	CCONJ
fuelectenerg-7534	513	5	high	high	ADJ
fuelectenerg-7534	513	6	attenuation	attenuation	NOUN
fuelectenerg-7534	513	7	along	along	ADP
fuelectenerg-7534	513	8	the	the	DET
fuelectenerg-7534	513	9	stopband	stopband	NOUN
fuelectenerg-7534	513	10	,	,	PUNCT
fuelectenerg-7534	513	11	[	[	X
fuelectenerg-7534	513	12	120	120	NUM
fuelectenerg-7534	513	13	]	]	PUNCT
fuelectenerg-7534	513	14	proposes	propose	VERB
fuelectenerg-7534	513	15	a	a	DET
fuelectenerg-7534	513	16	threepole	threepole	NOUN
fuelectenerg-7534	513	17	bandpass	bandpass	NOUN
fuelectenerg-7534	513	18	filter	filter	NOUN
fuelectenerg-7534	513	19	encompassing	encompass	VERB
fuelectenerg-7534	513	20	commercial	commercial	ADJ
fuelectenerg-7534	513	21	components	component	NOUN
fuelectenerg-7534	513	22	.	.	PUNCT
fuelectenerg-7534	514	1	in	in	ADP
fuelectenerg-7534	514	2	fact	fact	NOUN
fuelectenerg-7534	514	3	,	,	PUNCT
fuelectenerg-7534	514	4	the	the	DET
fuelectenerg-7534	514	5	three	three	NUM
fuelectenerg-7534	514	6	cascaded	cascade	VERB
fuelectenerg-7534	514	7	half	half	ADJ
fuelectenerg-7534	514	8	-	-	PUNCT
fuelectenerg-7534	514	9	wavelength	wavelength	NOUN
fuelectenerg-7534	514	10	resonators	resonator	NOUN
fuelectenerg-7534	514	11	are	be	AUX
fuelectenerg-7534	514	12	realized	realize	VERB
fuelectenerg-7534	514	13	by	by	ADP
fuelectenerg-7534	514	14	microstrip	microstrip	NOUN
fuelectenerg-7534	514	15	on	on	ADP
fuelectenerg-7534	514	16	roger	roger	PROPN
fuelectenerg-7534	514	17	ro4003c	ro4003c	PROPN
fuelectenerg-7534	514	18	substrate	substrate	NOUN
fuelectenerg-7534	514	19	,	,	PUNCT
fuelectenerg-7534	514	20	while	while	SCONJ
fuelectenerg-7534	514	21	each	each	DET
fuelectenerg-7534	514	22	digital	digital	ADJ
fuelectenerg-7534	514	23	variable	variable	ADJ
fuelectenerg-7534	514	24	capacitor	capacitor	NOUN
fuelectenerg-7534	514	25	loading	load	VERB
fuelectenerg-7534	514	26	a	a	DET
fuelectenerg-7534	514	27	resonator	resonator	NOUN
fuelectenerg-7534	514	28	is	be	AUX
fuelectenerg-7534	514	29	a	a	DET
fuelectenerg-7534	514	30	commercial	commercial	ADJ
fuelectenerg-7534	514	31	product	product	NOUN
fuelectenerg-7534	514	32	by	by	ADP
fuelectenerg-7534	514	33	cavendish	cavendish	PROPN
fuelectenerg-7534	514	34	kinetics	kinetic	NOUN
fuelectenerg-7534	514	35	.	.	PUNCT
fuelectenerg-7534	515	1	the	the	DET
fuelectenerg-7534	515	2	resulting	result	VERB
fuelectenerg-7534	515	3	device	device	NOUN
fuelectenerg-7534	515	4	is	be	AUX
fuelectenerg-7534	515	5	quite	quite	ADV
fuelectenerg-7534	515	6	compact	compact	ADJ
fuelectenerg-7534	515	7	,	,	PUNCT
fuelectenerg-7534	515	8	providing	provide	VERB
fuelectenerg-7534	515	9	a	a	DET
fuelectenerg-7534	515	10	wide	wide	ADJ
fuelectenerg-7534	515	11	tuning	tuning	NOUN
fuelectenerg-7534	515	12	range	range	NOUN
fuelectenerg-7534	515	13	by	by	ADP
fuelectenerg-7534	515	14	means	mean	NOUN
fuelectenerg-7534	515	15	of	of	ADP
fuelectenerg-7534	515	16	5	5	NUM
fuelectenerg-7534	515	17	states	state	NOUN
fuelectenerg-7534	515	18	covering	cover	VERB
fuelectenerg-7534	515	19	the	the	DET
fuelectenerg-7534	515	20	(	(	PUNCT
fuelectenerg-7534	515	21	5.3	5.3	NUM
fuelectenerg-7534	515	22	-	-	SYM
fuelectenerg-7534	515	23	7	7	NUM
fuelectenerg-7534	515	24	)	)	PUNCT
fuelectenerg-7534	515	25	ghz	ghz	NOUN
fuelectenerg-7534	515	26	interval	interval	NOUN
fuelectenerg-7534	515	27	.	.	PUNCT
fuelectenerg-7534	516	1	in	in	ADP
fuelectenerg-7534	516	2	each	each	DET
fuelectenerg-7534	516	3	state	state	NOUN
fuelectenerg-7534	516	4	,	,	PUNCT
fuelectenerg-7534	516	5	the	the	DET
fuelectenerg-7534	516	6	attenuation	attenuation	NOUN
fuelectenerg-7534	516	7	along	along	ADP
fuelectenerg-7534	516	8	the	the	DET
fuelectenerg-7534	516	9	stopband	stopband	NOUN
fuelectenerg-7534	516	10	is	be	AUX
fuelectenerg-7534	516	11	greater	great	ADJ
fuelectenerg-7534	516	12	than	than	ADP
fuelectenerg-7534	516	13	-30	-30	PROPN
fuelectenerg-7534	516	14	db	db	VERB
fuelectenerg-7534	516	15	up	up	ADP
fuelectenerg-7534	516	16	to	to	PART
fuelectenerg-7534	516	17	10	10	NUM
fuelectenerg-7534	516	18	ghz	ghz	NOUN
fuelectenerg-7534	516	19	,	,	PUNCT
fuelectenerg-7534	516	20	still	still	ADV
fuelectenerg-7534	516	21	maintaining	maintain	VERB
fuelectenerg-7534	516	22	limited	limited	ADJ
fuelectenerg-7534	516	23	losses	loss	NOUN
fuelectenerg-7534	516	24	.	.	PUNCT
fuelectenerg-7534	517	1	a	a	DET
fuelectenerg-7534	517	2	comparable	comparable	ADJ
fuelectenerg-7534	517	3	architecture	architecture	NOUN
fuelectenerg-7534	517	4	for	for	ADP
fuelectenerg-7534	517	5	l	l	NOUN
fuelectenerg-7534	517	6	band	band	NOUN
fuelectenerg-7534	517	7	applications	application	NOUN
fuelectenerg-7534	517	8	is	be	AUX
fuelectenerg-7534	517	9	described	describe	VERB
fuelectenerg-7534	517	10	in	in	ADP
fuelectenerg-7534	517	11	[	[	X
fuelectenerg-7534	517	12	121	121	NUM
fuelectenerg-7534	517	13	]	]	PUNCT
fuelectenerg-7534	517	14	,	,	PUNCT
fuelectenerg-7534	517	15	comprising	comprise	VERB
fuelectenerg-7534	517	16	a	a	DET
fuelectenerg-7534	517	17	three	three	NUM
fuelectenerg-7534	517	18	-	-	PUNCT
fuelectenerg-7534	517	19	pole	pole	NOUN
fuelectenerg-7534	517	20	resonator	resonator	NOUN
fuelectenerg-7534	517	21	made	make	VERB
fuelectenerg-7534	517	22	by	by	ADP
fuelectenerg-7534	517	23	coupled	couple	VERB
fuelectenerg-7534	517	24	quarter	quarter	NOUN
fuelectenerg-7534	517	25	-	-	PUNCT
fuelectenerg-7534	517	26	wavelength	wavelength	NOUN
fuelectenerg-7534	517	27	sections	section	NOUN
fuelectenerg-7534	517	28	of	of	ADP
fuelectenerg-7534	517	29	microstrip	microstrip	NOUN
fuelectenerg-7534	517	30	in	in	ADP
fuelectenerg-7534	517	31	combline	combline	NOUN
fuelectenerg-7534	517	32	configuration	configuration	NOUN
fuelectenerg-7534	517	33	.	.	PUNCT
fuelectenerg-7534	518	1	commercial	commercial	ADJ
fuelectenerg-7534	518	2	rf	rf	VERB
fuelectenerg-7534	518	3	-	-	PUNCT
fuelectenerg-7534	518	4	mems	mems	ADJ
fuelectenerg-7534	518	5	varactors	varactor	NOUN
fuelectenerg-7534	518	6	are	be	AUX
fuelectenerg-7534	518	7	employed	employ	VERB
fuelectenerg-7534	518	8	for	for	ADP
fuelectenerg-7534	518	9	tuning	tune	VERB
fuelectenerg-7534	518	10	the	the	DET
fuelectenerg-7534	518	11	basic	basic	ADJ
fuelectenerg-7534	518	12	resonant	resonant	ADJ
fuelectenerg-7534	518	13	frequency	frequency	NOUN
fuelectenerg-7534	518	14	(	(	PUNCT
fuelectenerg-7534	518	15	2.1	2.1	NUM
fuelectenerg-7534	518	16	ghz	ghz	NOUN
fuelectenerg-7534	518	17	)	)	PUNCT
fuelectenerg-7534	518	18	and	and	CCONJ
fuelectenerg-7534	518	19	for	for	ADP
fuelectenerg-7534	518	20	the	the	DET
fuelectenerg-7534	518	21	control	control	NOUN
fuelectenerg-7534	518	22	over	over	ADP
fuelectenerg-7534	518	23	the	the	DET
fuelectenerg-7534	518	24	capacitive	capacitive	ADJ
fuelectenerg-7534	518	25	coupling	coupling	NOUN
fuelectenerg-7534	518	26	between	between	ADP
fuelectenerg-7534	518	27	the	the	DET
fuelectenerg-7534	518	28	two	two	NUM
fuelectenerg-7534	518	29	microstrip	microstrip	NOUN
fuelectenerg-7534	518	30	resonators	resonator	NOUN
fuelectenerg-7534	518	31	.	.	PUNCT
fuelectenerg-7534	519	1	also	also	ADV
fuelectenerg-7534	519	2	in	in	ADP
fuelectenerg-7534	519	3	this	this	DET
fuelectenerg-7534	519	4	case	case	NOUN
fuelectenerg-7534	519	5	,	,	PUNCT
fuelectenerg-7534	519	6	the	the	DET
fuelectenerg-7534	519	7	layout	layout	NOUN
fuelectenerg-7534	519	8	is	be	AUX
fuelectenerg-7534	519	9	quite	quite	ADV
fuelectenerg-7534	519	10	compact	compact	ADJ
fuelectenerg-7534	519	11	,	,	PUNCT
fuelectenerg-7534	519	12	since	since	SCONJ
fuelectenerg-7534	519	13	the	the	DET
fuelectenerg-7534	519	14	size	size	NOUN
fuelectenerg-7534	519	15	does	do	AUX
fuelectenerg-7534	519	16	not	not	PART
fuelectenerg-7534	519	17	exceed	exceed	VERB
fuelectenerg-7534	519	18	9x5	9x5	NUM
fuelectenerg-7534	519	19	mm2	mm2	NOUN
fuelectenerg-7534	519	20	;	;	PUNCT
fuelectenerg-7534	519	21	the	the	DET
fuelectenerg-7534	519	22	attenuation	attenuation	NOUN
fuelectenerg-7534	519	23	in	in	ADP
fuelectenerg-7534	519	24	the	the	DET
fuelectenerg-7534	519	25	stopband	stopband	NOUN
fuelectenerg-7534	519	26	is	be	AUX
fuelectenerg-7534	519	27	comparable	comparable	ADJ
fuelectenerg-7534	519	28	as	as	ADV
fuelectenerg-7534	519	29	well	well	ADV
fuelectenerg-7534	519	30	.	.	PUNCT
fuelectenerg-7534	520	1	with	with	ADP
fuelectenerg-7534	520	2	the	the	DET
fuelectenerg-7534	520	3	proposed	propose	VERB
fuelectenerg-7534	520	4	device	device	NOUN
fuelectenerg-7534	520	5	,	,	PUNCT
fuelectenerg-7534	520	6	a	a	DET
fuelectenerg-7534	520	7	remarkable	remarkable	ADJ
fuelectenerg-7534	520	8	700	700	NUM
fuelectenerg-7534	520	9	mhz	mhz	NOUN
fuelectenerg-7534	520	10	tuning	tuning	NOUN
fuelectenerg-7534	520	11	range	range	NOUN
fuelectenerg-7534	520	12	can	can	AUX
fuelectenerg-7534	520	13	be	be	AUX
fuelectenerg-7534	520	14	achieved	achieve	VERB
fuelectenerg-7534	520	15	by	by	ADP
fuelectenerg-7534	520	16	21	21	NUM
fuelectenerg-7534	520	17	capacitance	capacitance	NOUN
fuelectenerg-7534	520	18	states	state	NOUN
fuelectenerg-7534	520	19	,	,	PUNCT
fuelectenerg-7534	520	20	with	with	ADP
fuelectenerg-7534	520	21	appreciable	appreciable	ADJ
fuelectenerg-7534	520	22	electrical	electrical	ADJ
fuelectenerg-7534	520	23	performances	performance	NOUN
fuelectenerg-7534	520	24	.	.	PUNCT
fuelectenerg-7534	521	1	360	360	NUM
fuelectenerg-7534	521	2	g.	g.	NOUN
fuelectenerg-7534	521	3	tagliapietra	tagliapietra	PROPN
fuelectenerg-7534	521	4	,	,	PUNCT
fuelectenerg-7534	521	5	j.	j.	PROPN
fuelectenerg-7534	521	6	iannacci	iannacci	PROPN
fuelectenerg-7534	521	7	table	table	PROPN
fuelectenerg-7534	521	8	8	8	NUM
fuelectenerg-7534	521	9	comparison	comparison	NOUN
fuelectenerg-7534	521	10	between	between	ADP
fuelectenerg-7534	521	11	the	the	DET
fuelectenerg-7534	521	12	different	different	ADJ
fuelectenerg-7534	521	13	discussed	discuss	VERB
fuelectenerg-7534	521	14	realizations	realization	NOUN
fuelectenerg-7534	521	15	of	of	ADP
fuelectenerg-7534	521	16	filters	filter	NOUN
fuelectenerg-7534	521	17	.	.	PUNCT
fuelectenerg-7534	522	1	reported	report	VERB
fuelectenerg-7534	522	2	values	value	NOUN
fuelectenerg-7534	522	3	of	of	ADP
fuelectenerg-7534	522	4	return	return	NOUN
fuelectenerg-7534	522	5	loss	loss	NOUN
fuelectenerg-7534	522	6	and	and	CCONJ
fuelectenerg-7534	522	7	insertion	insertion	NOUN
fuelectenerg-7534	522	8	loss	loss	NOUN
fuelectenerg-7534	522	9	refer	refer	VERB
fuelectenerg-7534	522	10	to	to	ADP
fuelectenerg-7534	522	11	the	the	DET
fuelectenerg-7534	522	12	worst	bad	ADJ
fuelectenerg-7534	522	13	assumed	assume	VERB
fuelectenerg-7534	522	14	value	value	NOUN
fuelectenerg-7534	522	15	.	.	PUNCT
fuelectenerg-7534	523	1	work	work	NOUN
fuelectenerg-7534	523	2	type	type	NOUN
fuelectenerg-7534	523	3	(	(	PUNCT
fuelectenerg-7534	523	4	bp	bp	PROPN
fuelectenerg-7534	523	5	/	/	SYM
fuelectenerg-7534	523	6	bs	bs	NOUN
fuelectenerg-7534	523	7	)	)	PUNCT
fuelectenerg-7534	523	8	tuning	tune	VERB
fuelectenerg-7534	523	9	range	range	NOUN
fuelectenerg-7534	523	10	(	(	PUNCT
fuelectenerg-7534	523	11	%	%	INTJ
fuelectenerg-7534	523	12	)	)	PUNCT
fuelectenerg-7534	523	13	q	q	PROPN
fuelectenerg-7534	523	14	unloaded	unload	VERB
fuelectenerg-7534	523	15	ret	ret	PROPN
fuelectenerg-7534	523	16	.	.	PUNCT
fuelectenerg-7534	524	1	loss	loss	PROPN
fuelectenerg-7534	524	2	(	(	PUNCT
fuelectenerg-7534	524	3	db	db	NOUN
fuelectenerg-7534	524	4	)	)	PUNCT
fuelectenerg-7534	524	5	ins	in	NOUN
fuelectenerg-7534	524	6	.	.	PUNCT
fuelectenerg-7534	525	1	loss	loss	NOUN
fuelectenerg-7534	525	2	(	(	PUNCT
fuelectenerg-7534	525	3	db	db	NOUN
fuelectenerg-7534	525	4	)	)	PUNCT
fuelectenerg-7534	525	5	actuation	actuation	NOUN
fuelectenerg-7534	525	6	(	(	PUNCT
fuelectenerg-7534	525	7	v	v	NOUN
fuelectenerg-7534	525	8	)	)	PUNCT
fuelectenerg-7534	526	1	[	[	X
fuelectenerg-7534	526	2	116	116	X
fuelectenerg-7534	526	3	]	]	PUNCT
fuelectenerg-7534	526	4	bs	bs	NOUN
fuelectenerg-7534	526	5	10	10	NUM
fuelectenerg-7534	526	6	-2	-2	NOUN
fuelectenerg-7534	526	7	-31	-31	NUM
fuelectenerg-7534	526	8	25.65	25.65	NUM
fuelectenerg-7534	527	1	[	[	X
fuelectenerg-7534	527	2	117	117	NUM
fuelectenerg-7534	527	3	]	]	PUNCT
fuelectenerg-7534	527	4	bs	bs	NOUN
fuelectenerg-7534	527	5	10	10	NUM
fuelectenerg-7534	527	6	-3	-3	PUNCT
fuelectenerg-7534	527	7	-42	-42	PUNCT
fuelectenerg-7534	528	1	[	[	X
fuelectenerg-7534	528	2	118	118	NUM
fuelectenerg-7534	528	3	]	]	PUNCT
fuelectenerg-7534	528	4	bs	bs	NOUN
fuelectenerg-7534	528	5	16	16	NUM
fuelectenerg-7534	528	6	-10	-10	NUM
fuelectenerg-7534	528	7	-75	-75	PUNCT
fuelectenerg-7534	529	1	[	[	X
fuelectenerg-7534	529	2	120	120	NUM
fuelectenerg-7534	529	3	]	]	PUNCT
fuelectenerg-7534	529	4	bp	bp	PROPN
fuelectenerg-7534	529	5	32	32	NUM
fuelectenerg-7534	530	1	200	200	NUM
fuelectenerg-7534	530	2	-17.5	-17.5	NUM
fuelectenerg-7534	530	3	-5.3	-5.3	X
fuelectenerg-7534	531	1	[	[	X
fuelectenerg-7534	531	2	121	121	NUM
fuelectenerg-7534	531	3	]	]	PUNCT
fuelectenerg-7534	531	4	bp	bp	PROPN
fuelectenerg-7534	531	5	50	50	NUM
fuelectenerg-7534	531	6	253	253	NUM
fuelectenerg-7534	531	7	-20	-20	NUM
fuelectenerg-7534	531	8	-2	-2	NOUN
fuelectenerg-7534	531	9	30	30	NUM
fuelectenerg-7534	532	1	[	[	SYM
fuelectenerg-7534	532	2	122	122	NUM
fuelectenerg-7534	532	3	]	]	SYM
fuelectenerg-7534	532	4	bp	bp	PROPN
fuelectenerg-7534	532	5	650	650	NUM
fuelectenerg-7534	532	6	-12.7	-12.7	NUM
fuelectenerg-7534	532	7	-6.8	-6.8	NOUN
fuelectenerg-7534	532	8	40	40	NUM
fuelectenerg-7534	532	9	a	a	DET
fuelectenerg-7534	532	10	tunable	tunable	ADJ
fuelectenerg-7534	532	11	bandpass	bandpass	NOUN
fuelectenerg-7534	532	12	filter	filter	NOUN
fuelectenerg-7534	532	13	covering	cover	VERB
fuelectenerg-7534	532	14	almost	almost	ADV
fuelectenerg-7534	532	15	the	the	DET
fuelectenerg-7534	532	16	entire	entire	ADJ
fuelectenerg-7534	532	17	uhf	uhf	PROPN
fuelectenerg-7534	532	18	band	band	NOUN
fuelectenerg-7534	532	19	is	be	AUX
fuelectenerg-7534	532	20	presented	present	VERB
fuelectenerg-7534	532	21	in	in	ADP
fuelectenerg-7534	532	22	[	[	X
fuelectenerg-7534	532	23	122	122	NUM
fuelectenerg-7534	532	24	]	]	PUNCT
fuelectenerg-7534	532	25	.	.	PUNCT
fuelectenerg-7534	533	1	the	the	DET
fuelectenerg-7534	533	2	basic	basic	ADJ
fuelectenerg-7534	533	3	structure	structure	NOUN
fuelectenerg-7534	533	4	is	be	AUX
fuelectenerg-7534	533	5	represented	represent	VERB
fuelectenerg-7534	533	6	by	by	ADP
fuelectenerg-7534	533	7	a	a	DET
fuelectenerg-7534	533	8	half	half	ADJ
fuelectenerg-7534	533	9	-	-	PUNCT
fuelectenerg-7534	533	10	wavelength	wavelength	NOUN
fuelectenerg-7534	533	11	and	and	CCONJ
fuelectenerg-7534	533	12	a	a	DET
fuelectenerg-7534	533	13	quarter	quarter	NOUN
fuelectenerg-7534	533	14	-	-	PUNCT
fuelectenerg-7534	533	15	wavelength	wavelength	NOUN
fuelectenerg-7534	533	16	microstrip	microstrip	NOUN
fuelectenerg-7534	533	17	resonator	resonator	NOUN
fuelectenerg-7534	533	18	in	in	ADP
fuelectenerg-7534	533	19	concentric	concentric	ADJ
fuelectenerg-7534	533	20	/	/	SYM
fuelectenerg-7534	533	21	nested	nested	ADJ
fuelectenerg-7534	533	22	arrangement	arrangement	NOUN
fuelectenerg-7534	533	23	.	.	PUNCT
fuelectenerg-7534	534	1	a	a	DET
fuelectenerg-7534	534	2	couple	couple	NOUN
fuelectenerg-7534	534	3	of	of	ADP
fuelectenerg-7534	534	4	rf	rf	ADJ
fuelectenerg-7534	534	5	-	-	PUNCT
fuelectenerg-7534	534	6	mems	mems	ADJ
fuelectenerg-7534	534	7	switches	switch	NOUN
fuelectenerg-7534	534	8	control	control	VERB
fuelectenerg-7534	534	9	the	the	DET
fuelectenerg-7534	534	10	activation	activation	NOUN
fuelectenerg-7534	534	11	of	of	ADP
fuelectenerg-7534	534	12	each	each	DET
fuelectenerg-7534	534	13	resonator	resonator	NOUN
fuelectenerg-7534	534	14	,	,	PUNCT
fuelectenerg-7534	534	15	so	so	SCONJ
fuelectenerg-7534	534	16	that	that	SCONJ
fuelectenerg-7534	534	17	the	the	DET
fuelectenerg-7534	534	18	activation	activation	NOUN
fuelectenerg-7534	534	19	of	of	ADP
fuelectenerg-7534	534	20	one	one	NUM
fuelectenerg-7534	534	21	,	,	PUNCT
fuelectenerg-7534	534	22	of	of	ADP
fuelectenerg-7534	534	23	the	the	DET
fuelectenerg-7534	534	24	other	other	ADJ
fuelectenerg-7534	534	25	,	,	PUNCT
fuelectenerg-7534	534	26	or	or	CCONJ
fuelectenerg-7534	534	27	of	of	ADP
fuelectenerg-7534	534	28	both	both	DET
fuelectenerg-7534	534	29	resonators	resonator	NOUN
fuelectenerg-7534	534	30	,	,	PUNCT
fuelectenerg-7534	534	31	realizes	realize	VERB
fuelectenerg-7534	534	32	a	a	DET
fuelectenerg-7534	534	33	first	first	ADJ
fuelectenerg-7534	534	34	coarse	coarse	ADJ
fuelectenerg-7534	534	35	tuning	tuning	NOUN
fuelectenerg-7534	534	36	of	of	ADP
fuelectenerg-7534	534	37	the	the	DET
fuelectenerg-7534	534	38	resonant	resonant	ADJ
fuelectenerg-7534	534	39	frequency	frequency	NOUN
fuelectenerg-7534	534	40	.	.	PUNCT
fuelectenerg-7534	535	1	the	the	DET
fuelectenerg-7534	535	2	fine	fine	ADJ
fuelectenerg-7534	535	3	tuning	tuning	NOUN
fuelectenerg-7534	535	4	is	be	AUX
fuelectenerg-7534	535	5	then	then	ADV
fuelectenerg-7534	535	6	performed	perform	VERB
fuelectenerg-7534	535	7	by	by	ADP
fuelectenerg-7534	535	8	a	a	DET
fuelectenerg-7534	535	9	bank	bank	NOUN
fuelectenerg-7534	535	10	of	of	ADP
fuelectenerg-7534	535	11	switched	switch	VERB
fuelectenerg-7534	535	12	capacitors	capacitor	NOUN
fuelectenerg-7534	535	13	connected	connect	VERB
fuelectenerg-7534	535	14	to	to	ADP
fuelectenerg-7534	535	15	each	each	DET
fuelectenerg-7534	535	16	resonator	resonator	NOUN
fuelectenerg-7534	535	17	.	.	PUNCT
fuelectenerg-7534	536	1	the	the	DET
fuelectenerg-7534	536	2	choice	choice	NOUN
fuelectenerg-7534	536	3	of	of	ADP
fuelectenerg-7534	536	4	the	the	DET
fuelectenerg-7534	536	5	nested	nested	ADJ
fuelectenerg-7534	536	6	arrangement	arrangement	NOUN
fuelectenerg-7534	536	7	allowed	allow	VERB
fuelectenerg-7534	536	8	the	the	DET
fuelectenerg-7534	536	9	authors	author	NOUN
fuelectenerg-7534	536	10	to	to	PART
fuelectenerg-7534	536	11	achieve	achieve	VERB
fuelectenerg-7534	536	12	fairly	fairly	ADV
fuelectenerg-7534	536	13	limited	limit	VERB
fuelectenerg-7534	536	14	dimensions	dimension	NOUN
fuelectenerg-7534	536	15	(	(	PUNCT
fuelectenerg-7534	536	16	26x36	26x36	NUM
fuelectenerg-7534	536	17	mm2	mm2	NOUN
fuelectenerg-7534	536	18	)	)	PUNCT
fuelectenerg-7534	536	19	,	,	PUNCT
fuelectenerg-7534	536	20	for	for	ADP
fuelectenerg-7534	536	21	a	a	DET
fuelectenerg-7534	536	22	device	device	NOUN
fuelectenerg-7534	536	23	working	work	VERB
fuelectenerg-7534	536	24	at	at	ADP
fuelectenerg-7534	536	25	relatively	relatively	ADV
fuelectenerg-7534	536	26	low	low	ADJ
fuelectenerg-7534	536	27	frequencies	frequency	NOUN
fuelectenerg-7534	536	28	,	,	PUNCT
fuelectenerg-7534	536	29	fabricated	fabricate	VERB
fuelectenerg-7534	536	30	on	on	ADP
fuelectenerg-7534	536	31	common	common	ADJ
fuelectenerg-7534	536	32	rt	rt	PROPN
fuelectenerg-7534	536	33	/	/	SYM
fuelectenerg-7534	536	34	duroid	duroid	NOUN
fuelectenerg-7534	536	35	substrate	substrate	NOUN
fuelectenerg-7534	536	36	and	and	CCONJ
fuelectenerg-7534	536	37	equipped	equip	VERB
fuelectenerg-7534	536	38	with	with	ADP
fuelectenerg-7534	536	39	commercial	commercial	ADJ
fuelectenerg-7534	536	40	lumped	lump	VERB
fuelectenerg-7534	536	41	components	component	NOUN
fuelectenerg-7534	536	42	.	.	PUNCT
fuelectenerg-7534	537	1	in	in	ADP
fuelectenerg-7534	537	2	terms	term	NOUN
fuelectenerg-7534	537	3	of	of	ADP
fuelectenerg-7534	537	4	capabilities	capability	NOUN
fuelectenerg-7534	537	5	,	,	PUNCT
fuelectenerg-7534	537	6	the	the	DET
fuelectenerg-7534	537	7	wide	wide	ADJ
fuelectenerg-7534	537	8	tuning	tuning	NOUN
fuelectenerg-7534	537	9	range	range	NOUN
fuelectenerg-7534	537	10	(	(	PUNCT
fuelectenerg-7534	537	11	(	(	PUNCT
fuelectenerg-7534	537	12	0.4	0.4	NUM
fuelectenerg-7534	537	13	-	-	SYM
fuelectenerg-7534	537	14	3	3	NUM
fuelectenerg-7534	537	15	)	)	PUNCT
fuelectenerg-7534	537	16	ghz	ghz	NOUN
fuelectenerg-7534	537	17	)	)	PUNCT
fuelectenerg-7534	537	18	of	of	ADP
fuelectenerg-7534	537	19	such	such	ADJ
fuelectenerg-7534	537	20	device	device	NOUN
fuelectenerg-7534	537	21	is	be	AUX
fuelectenerg-7534	537	22	inevitably	inevitably	ADV
fuelectenerg-7534	537	23	counterbalanced	counterbalance	VERB
fuelectenerg-7534	537	24	by	by	ADP
fuelectenerg-7534	537	25	contained	contain	VERB
fuelectenerg-7534	537	26	electrical	electrical	ADJ
fuelectenerg-7534	537	27	performances	performance	NOUN
fuelectenerg-7534	537	28	.	.	PUNCT
fuelectenerg-7534	538	1	7	7	X
fuelectenerg-7534	538	2	.	.	X
fuelectenerg-7534	538	3	conclusions	conclusion	NOUN
fuelectenerg-7534	538	4	the	the	DET
fuelectenerg-7534	538	5	abovementioned	abovementione	VERB
fuelectenerg-7534	538	6	examples	example	NOUN
fuelectenerg-7534	538	7	of	of	ADP
fuelectenerg-7534	538	8	rf	rf	ADJ
fuelectenerg-7534	538	9	-	-	PUNCT
fuelectenerg-7534	538	10	mems	mem	NOUN
fuelectenerg-7534	538	11	devices	device	NOUN
fuelectenerg-7534	538	12	portray	portray	VERB
fuelectenerg-7534	538	13	the	the	DET
fuelectenerg-7534	538	14	current	current	ADJ
fuelectenerg-7534	538	15	state	state	NOUN
fuelectenerg-7534	538	16	of	of	ADP
fuelectenerg-7534	538	17	the	the	DET
fuelectenerg-7534	538	18	art	art	NOUN
fuelectenerg-7534	538	19	of	of	ADP
fuelectenerg-7534	538	20	a	a	DET
fuelectenerg-7534	538	21	technology	technology	NOUN
fuelectenerg-7534	538	22	that	that	PRON
fuelectenerg-7534	538	23	is	be	AUX
fuelectenerg-7534	538	24	now	now	ADV
fuelectenerg-7534	538	25	mature	mature	ADJ
fuelectenerg-7534	538	26	to	to	PART
fuelectenerg-7534	538	27	face	face	VERB
fuelectenerg-7534	538	28	current	current	ADJ
fuelectenerg-7534	538	29	challenges	challenge	NOUN
fuelectenerg-7534	538	30	posed	pose	VERB
fuelectenerg-7534	538	31	by	by	ADP
fuelectenerg-7534	538	32	the	the	DET
fuelectenerg-7534	538	33	5	5	NUM
fuelectenerg-7534	538	34	g	g	NOUN
fuelectenerg-7534	538	35	applications	application	NOUN
fuelectenerg-7534	538	36	.	.	PUNCT
fuelectenerg-7534	539	1	besides	besides	SCONJ
fuelectenerg-7534	539	2	the	the	DET
fuelectenerg-7534	539	3	intrinsic	intrinsic	ADJ
fuelectenerg-7534	539	4	reconfigurability	reconfigurability	NOUN
fuelectenerg-7534	539	5	,	,	PUNCT
fuelectenerg-7534	539	6	considerable	considerable	ADJ
fuelectenerg-7534	539	7	wideband	wideband	NOUN
fuelectenerg-7534	539	8	performances	performance	NOUN
fuelectenerg-7534	539	9	and	and	CCONJ
fuelectenerg-7534	539	10	low	low	ADJ
fuelectenerg-7534	539	11	power	power	NOUN
fuelectenerg-7534	539	12	consumption	consumption	NOUN
fuelectenerg-7534	539	13	,	,	PUNCT
fuelectenerg-7534	539	14	research	research	NOUN
fuelectenerg-7534	539	15	on	on	ADP
fuelectenerg-7534	539	16	rf	rf	NOUN
fuelectenerg-7534	539	17	mems	mem	NOUN
fuelectenerg-7534	539	18	has	have	AUX
fuelectenerg-7534	539	19	provided	provide	VERB
fuelectenerg-7534	539	20	components	component	NOUN
fuelectenerg-7534	539	21	characterized	characterize	VERB
fuelectenerg-7534	539	22	by	by	ADP
fuelectenerg-7534	539	23	an	an	DET
fuelectenerg-7534	539	24	increasing	increase	VERB
fuelectenerg-7534	539	25	miniaturization	miniaturization	NOUN
fuelectenerg-7534	539	26	and	and	CCONJ
fuelectenerg-7534	539	27	reliability	reliability	NOUN
fuelectenerg-7534	539	28	,	,	PUNCT
fuelectenerg-7534	539	29	manageable	manageable	ADJ
fuelectenerg-7534	539	30	control	control	NOUN
fuelectenerg-7534	539	31	signals	signal	NOUN
fuelectenerg-7534	539	32	,	,	PUNCT
fuelectenerg-7534	539	33	and	and	CCONJ
fuelectenerg-7534	539	34	compatibility	compatibility	NOUN
fuelectenerg-7534	539	35	with	with	ADP
fuelectenerg-7534	539	36	existing	exist	VERB
fuelectenerg-7534	539	37	technologies	technology	NOUN
fuelectenerg-7534	539	38	.	.	PUNCT
fuelectenerg-7534	540	1	among	among	ADP
fuelectenerg-7534	540	2	the	the	DET
fuelectenerg-7534	540	3	different	different	ADJ
fuelectenerg-7534	540	4	proposals	proposal	NOUN
fuelectenerg-7534	540	5	,	,	PUNCT
fuelectenerg-7534	540	6	while	while	SCONJ
fuelectenerg-7534	540	7	some	some	PRON
fuelectenerg-7534	540	8	may	may	AUX
fuelectenerg-7534	540	9	seem	seem	VERB
fuelectenerg-7534	540	10	more	more	ADV
fuelectenerg-7534	540	11	appropriate	appropriate	ADJ
fuelectenerg-7534	540	12	for	for	ADP
fuelectenerg-7534	540	13	fixed	fix	VERB
fuelectenerg-7534	540	14	infrastructures	infrastructure	NOUN
fuelectenerg-7534	540	15	,	,	PUNCT
fuelectenerg-7534	540	16	other	other	ADJ
fuelectenerg-7534	540	17	may	may	AUX
fuelectenerg-7534	540	18	apply	apply	VERB
fuelectenerg-7534	540	19	to	to	ADP
fuelectenerg-7534	540	20	mobile	mobile	ADJ
fuelectenerg-7534	540	21	low	low	ADJ
fuelectenerg-7534	540	22	power	power	NOUN
fuelectenerg-7534	540	23	devices	device	NOUN
fuelectenerg-7534	540	24	for	for	ADP
fuelectenerg-7534	540	25	their	their	PRON
fuelectenerg-7534	540	26	limited	limited	ADJ
fuelectenerg-7534	540	27	size	size	NOUN
fuelectenerg-7534	540	28	and	and	CCONJ
fuelectenerg-7534	540	29	control	control	NOUN
fuelectenerg-7534	540	30	voltage	voltage	NOUN
fuelectenerg-7534	540	31	.	.	PUNCT
fuelectenerg-7534	541	1	many	many	ADJ
fuelectenerg-7534	541	2	devices	device	NOUN
fuelectenerg-7534	541	3	proved	prove	VERB
fuelectenerg-7534	541	4	a	a	DET
fuelectenerg-7534	541	5	satisfying	satisfying	ADJ
fuelectenerg-7534	541	6	reliability	reliability	NOUN
fuelectenerg-7534	541	7	under	under	ADP
fuelectenerg-7534	541	8	extensive	extensive	ADJ
fuelectenerg-7534	541	9	power	power	NOUN
fuelectenerg-7534	541	10	and	and	CCONJ
fuelectenerg-7534	541	11	temperature	temperature	NOUN
fuelectenerg-7534	541	12	measurements	measurement	NOUN
fuelectenerg-7534	541	13	,	,	PUNCT
fuelectenerg-7534	541	14	reinforced	reinforce	VERB
fuelectenerg-7534	541	15	by	by	ADP
fuelectenerg-7534	541	16	low	low	ADJ
fuelectenerg-7534	541	17	cost	cost	NOUN
fuelectenerg-7534	541	18	and	and	CCONJ
fuelectenerg-7534	541	19	effective	effective	ADJ
fuelectenerg-7534	541	20	packaging	packaging	NOUN
fuelectenerg-7534	541	21	strategies	strategy	NOUN
fuelectenerg-7534	541	22	.	.	PUNCT
fuelectenerg-7534	542	1	the	the	DET
fuelectenerg-7534	542	2	range	range	NOUN
fuelectenerg-7534	542	3	of	of	ADP
fuelectenerg-7534	542	4	frequencies	frequency	NOUN
fuelectenerg-7534	542	5	covered	cover	VERB
fuelectenerg-7534	542	6	by	by	ADP
fuelectenerg-7534	542	7	the	the	DET
fuelectenerg-7534	542	8	mentioned	mention	VERB
fuelectenerg-7534	542	9	examples	example	NOUN
fuelectenerg-7534	542	10	comprehend	comprehend	VERB
fuelectenerg-7534	542	11	both	both	DET
fuelectenerg-7534	542	12	portions	portion	NOUN
fuelectenerg-7534	542	13	below	below	ADP
fuelectenerg-7534	542	14	6	6	NUM
fuelectenerg-7534	542	15	ghz	ghz	NOUN
fuelectenerg-7534	542	16	and	and	CCONJ
fuelectenerg-7534	542	17	higher	high	ADJ
fuelectenerg-7534	542	18	ones	one	NOUN
fuelectenerg-7534	542	19	,	,	PUNCT
fuelectenerg-7534	542	20	involving	involve	VERB
fuelectenerg-7534	542	21	all	all	DET
fuelectenerg-7534	542	22	those	those	DET
fuelectenerg-7534	542	23	bands	band	NOUN
fuelectenerg-7534	542	24	engaged	engage	VERB
fuelectenerg-7534	542	25	in	in	ADP
fuelectenerg-7534	542	26	the	the	DET
fuelectenerg-7534	542	27	realization	realization	NOUN
fuelectenerg-7534	542	28	of	of	ADP
fuelectenerg-7534	542	29	5	5	NUM
fuelectenerg-7534	542	30	g	g	NOUN
fuelectenerg-7534	542	31	infrastructure	infrastructure	NOUN
fuelectenerg-7534	542	32	.	.	PUNCT
fuelectenerg-7534	543	1	in	in	ADP
fuelectenerg-7534	543	2	addition	addition	NOUN
fuelectenerg-7534	543	3	to	to	ADP
fuelectenerg-7534	543	4	the	the	DET
fuelectenerg-7534	543	5	previous	previous	ADJ
fuelectenerg-7534	543	6	considerations	consideration	NOUN
fuelectenerg-7534	543	7	,	,	PUNCT
fuelectenerg-7534	543	8	the	the	DET
fuelectenerg-7534	543	9	electrical	electrical	ADJ
fuelectenerg-7534	543	10	performances	performance	NOUN
fuelectenerg-7534	543	11	of	of	ADP
fuelectenerg-7534	543	12	the	the	DET
fuelectenerg-7534	543	13	reported	report	VERB
fuelectenerg-7534	543	14	rf	rf	NOUN
fuelectenerg-7534	543	15	mems	mem	NOUN
fuelectenerg-7534	543	16	devices	device	NOUN
fuelectenerg-7534	543	17	proved	prove	VERB
fuelectenerg-7534	543	18	themselves	themselves	PRON
fuelectenerg-7534	543	19	to	to	PART
fuelectenerg-7534	543	20	be	be	AUX
fuelectenerg-7534	543	21	a	a	DET
fuelectenerg-7534	543	22	valuable	valuable	ADJ
fuelectenerg-7534	543	23	plus	plus	NOUN
fuelectenerg-7534	543	24	of	of	ADP
fuelectenerg-7534	543	25	this	this	DET
fuelectenerg-7534	543	26	technology	technology	NOUN
fuelectenerg-7534	543	27	,	,	PUNCT
fuelectenerg-7534	543	28	in	in	ADP
fuelectenerg-7534	543	29	view	view	NOUN
fuelectenerg-7534	543	30	of	of	ADP
fuelectenerg-7534	543	31	a	a	DET
fuelectenerg-7534	543	32	potentially	potentially	ADV
fuelectenerg-7534	543	33	significant	significant	ADJ
fuelectenerg-7534	543	34	role	role	NOUN
fuelectenerg-7534	543	35	in	in	ADP
fuelectenerg-7534	543	36	5	5	NUM
fuelectenerg-7534	543	37	g	g	PROPN
fuelectenerg-7534	543	38	scenario	scenario	NOUN
fuelectenerg-7534	543	39	.	.	PUNCT
fuelectenerg-7534	544	1	acknowledgement	acknowledgement	NOUN
fuelectenerg-7534	544	2	:	:	PUNCT
fuelectenerg-7534	544	3	this	this	DET
fuelectenerg-7534	544	4	paper	paper	NOUN
fuelectenerg-7534	544	5	is	be	AUX
fuelectenerg-7534	544	6	published	publish	VERB
fuelectenerg-7534	544	7	thanks	thank	NOUN
fuelectenerg-7534	544	8	to	to	ADP
fuelectenerg-7534	544	9	the	the	DET
fuelectenerg-7534	544	10	support	support	NOUN
fuelectenerg-7534	544	11	of	of	ADP
fuelectenerg-7534	544	12	the	the	DET
fuelectenerg-7534	544	13	project	project	NOUN
fuelectenerg-7534	544	14	“	"	PUNCT
fuelectenerg-7534	544	15	wafer	wafer	NOUN
fuelectenerg-7534	544	16	level	level	NOUN
fuelectenerg-7534	544	17	micropackaging	micropackage	VERB
fuelectenerg-7534	544	18	di	di	NOUN
fuelectenerg-7534	544	19	rf	rf	VERB
fuelectenerg-7534	544	20	mems	mems	PROPN
fuelectenerg-7534	544	21	switch	switch	NOUN
fuelectenerg-7534	544	22	per	per	ADP
fuelectenerg-7534	544	23	applicazioni	applicazioni	X
fuelectenerg-7534	544	24	spaziali	spaziali	PROPN
fuelectenerg-7534	544	25	”	"	PUNCT
fuelectenerg-7534	544	26	(	(	PUNCT
fuelectenerg-7534	544	27	f36c18000400005	f36c18000400005	ADV
fuelectenerg-7534	544	28	)	)	PUNCT
fuelectenerg-7534	544	29	funded	fund	VERB
fuelectenerg-7534	544	30	by	by	ADP
fuelectenerg-7534	544	31	the	the	DET
fuelectenerg-7534	544	32	agenzia	agenzia	PROPN
fuelectenerg-7534	544	33	spaziale	spaziale	PROPN
fuelectenerg-7534	544	34	italiana	italiana	PROPN
fuelectenerg-7534	544	35	(	(	PUNCT
fuelectenerg-7534	544	36	asi	asi	NOUN
fuelectenerg-7534	544	37	)	)	PUNCT
fuelectenerg-7534	544	38	.	.	PUNCT
fuelectenerg-7534	545	1	a	a	DET
fuelectenerg-7534	545	2	comprehensive	comprehensive	ADJ
fuelectenerg-7534	545	3	overview	overview	NOUN
fuelectenerg-7534	545	4	of	of	ADP
fuelectenerg-7534	545	5	recent	recent	ADJ
fuelectenerg-7534	545	6	developments	development	NOUN
fuelectenerg-7534	545	7	in	in	ADP
fuelectenerg-7534	545	8	rf	rf	ADJ
fuelectenerg-7534	545	9	-	-	PUNCT
fuelectenerg-7534	545	10	mems	mems	ADJ
fuelectenerg-7534	545	11	technology	technology	NOUN
fuelectenerg-7534	545	12	361	361	NUM
fuelectenerg-7534	545	13	references	reference	NOUN
fuelectenerg-7534	545	14	[	[	X
fuelectenerg-7534	545	15	1	1	NUM
fuelectenerg-7534	545	16	]	]	X
fuelectenerg-7534	545	17	g.	g.	NOUN
fuelectenerg-7534	545	18	tagliapietra	tagliapietra	PROPN
fuelectenerg-7534	545	19	and	and	CCONJ
fuelectenerg-7534	545	20	j.	j.	PROPN
fuelectenerg-7534	545	21	iannacci	iannacci	PROPN
fuelectenerg-7534	545	22	,	,	PUNCT
fuelectenerg-7534	545	23	“	"	PUNCT
fuelectenerg-7534	545	24	overview	overview	NOUN
fuelectenerg-7534	545	25	of	of	ADP
fuelectenerg-7534	545	26	recent	recent	ADJ
fuelectenerg-7534	545	27	developments	development	NOUN
fuelectenerg-7534	545	28	in	in	ADP
fuelectenerg-7534	545	29	rf	rf	ADJ
fuelectenerg-7534	545	30	-	-	PUNCT
fuelectenerg-7534	545	31	mems	mems	ADJ
fuelectenerg-7534	545	32	technology	technology	NOUN
fuelectenerg-7534	545	33	with	with	ADP
fuelectenerg-7534	545	34	reference	reference	NOUN
fuelectenerg-7534	545	35	to	to	ADP
fuelectenerg-7534	545	36	5	5	NUM
fuelectenerg-7534	545	37	g	g	NOUN
fuelectenerg-7534	545	38	emerging	emerge	VERB
fuelectenerg-7534	545	39	applications	application	NOUN
fuelectenerg-7534	545	40	,	,	PUNCT
fuelectenerg-7534	545	41	”	"	PUNCT
fuelectenerg-7534	545	42	in	in	ADP
fuelectenerg-7534	545	43	proceedings	proceeding	NOUN
fuelectenerg-7534	545	44	of	of	ADP
fuelectenerg-7534	545	45	the	the	DET
fuelectenerg-7534	545	46	1st	1st	ADJ
fuelectenerg-7534	545	47	international	international	ADJ
fuelectenerg-7534	545	48	conference	conference	NOUN
fuelectenerg-7534	545	49	on	on	ADP
fuelectenerg-7534	545	50	micro	micro	ADJ
fuelectenerg-7534	545	51	/	/	NOUN
fuelectenerg-7534	545	52	nanoelectronics	nanoelectronic	NOUN
fuelectenerg-7534	545	53	devices	device	NOUN
fuelectenerg-7534	545	54	,	,	PUNCT
fuelectenerg-7534	545	55	circuits	circuit	NOUN
fuelectenerg-7534	545	56	and	and	CCONJ
fuelectenerg-7534	545	57	systems	system	NOUN
fuelectenerg-7534	545	58	(	(	PUNCT
fuelectenerg-7534	545	59	mndcs	mndc	NOUN
fuelectenerg-7534	545	60	2021	2021	NUM
fuelectenerg-7534	545	61	)	)	PUNCT
fuelectenerg-7534	545	62	,	,	PUNCT
fuelectenerg-7534	545	63	pages	page	NOUN
fuelectenerg-7534	545	64	1–31	1–31	PROPN
fuelectenerg-7534	545	65	,	,	PUNCT
fuelectenerg-7534	545	66	2021	2021	NUM
fuelectenerg-7534	545	67	.	.	PUNCT
fuelectenerg-7534	546	1	[	[	X
fuelectenerg-7534	546	2	2	2	X
fuelectenerg-7534	546	3	]	]	PUNCT
fuelectenerg-7534	546	4	j.	j.	PROPN
fuelectenerg-7534	546	5	iannacci	iannacci	PROPN
fuelectenerg-7534	546	6	,	,	PUNCT
fuelectenerg-7534	546	7	“	"	PUNCT
fuelectenerg-7534	546	8	rf	rf	NOUN
fuelectenerg-7534	546	9	-	-	PUNCT
fuelectenerg-7534	546	10	mems	mem	NOUN
fuelectenerg-7534	546	11	:	:	PUNCT
fuelectenerg-7534	546	12	an	an	DET
fuelectenerg-7534	546	13	enabling	enable	VERB
fuelectenerg-7534	546	14	technology	technology	NOUN
fuelectenerg-7534	546	15	for	for	ADP
fuelectenerg-7534	546	16	modern	modern	ADJ
fuelectenerg-7534	546	17	wireless	wireless	ADJ
fuelectenerg-7534	546	18	systems	system	NOUN
fuelectenerg-7534	546	19	bearing	bear	VERB
fuelectenerg-7534	546	20	a	a	DET
fuelectenerg-7534	546	21	market	market	NOUN
fuelectenerg-7534	546	22	potential	potential	NOUN
fuelectenerg-7534	546	23	still	still	ADV
fuelectenerg-7534	546	24	not	not	PART
fuelectenerg-7534	546	25	fully	fully	ADV
fuelectenerg-7534	546	26	displayed	display	VERB
fuelectenerg-7534	546	27	,	,	PUNCT
fuelectenerg-7534	546	28	”	"	PUNCT
fuelectenerg-7534	546	29	microsystem	microsystem	NOUN
fuelectenerg-7534	546	30	technologies	technology	NOUN
fuelectenerg-7534	546	31	,	,	PUNCT
fuelectenerg-7534	546	32	vol	vol	NOUN
fuelectenerg-7534	546	33	.	.	PROPN
fuelectenerg-7534	546	34	14	14	NUM
fuelectenerg-7534	546	35	,	,	PUNCT
fuelectenerg-7534	546	36	no	no	INTJ
fuelectenerg-7534	546	37	.	.	NOUN
fuelectenerg-7534	546	38	09	09	NUM
fuelectenerg-7534	546	39	,	,	PUNCT
fuelectenerg-7534	546	40	2015	2015	NUM
fuelectenerg-7534	546	41	.	.	PUNCT
fuelectenerg-7534	547	1	[	[	X
fuelectenerg-7534	547	2	3	3	X
fuelectenerg-7534	547	3	]	]	X
fuelectenerg-7534	547	4	omron	omron	PROPN
fuelectenerg-7534	547	5	website	website	NOUN
fuelectenerg-7534	547	6	.	.	PUNCT
fuelectenerg-7534	548	1	omron	omron	PROPN
fuelectenerg-7534	548	2	electronic	electronic	ADJ
fuelectenerg-7534	548	3	components	component	NOUN
fuelectenerg-7534	548	4	.	.	PUNCT
fuelectenerg-7534	549	1	[	[	X
fuelectenerg-7534	549	2	online	online	X
fuelectenerg-7534	549	3	]	]	X
fuelectenerg-7534	549	4	,	,	PUNCT
fuelectenerg-7534	549	5	accessed	access	VERB
fuelectenerg-7534	549	6	:	:	PUNCT
fuelectenerg-7534	549	7	nov	nov	PROPN
fuelectenerg-7534	549	8	.	.	PROPN
fuelectenerg-7534	549	9	19	19	NUM
fuelectenerg-7534	549	10	,	,	PUNCT
fuelectenerg-7534	549	11	2020	2020	NUM
fuelectenerg-7534	549	12	.	.	PUNCT
fuelectenerg-7534	550	1	https://www.components	https://www.component	NOUN
fuelectenerg-7534	550	2	.	.	PUNCT
fuelectenerg-7534	551	1	omron.com/.	omron.com/.	NOUN
fuelectenerg-7534	551	2	[	[	X
fuelectenerg-7534	551	3	4	4	X
fuelectenerg-7534	551	4	]	]	PUNCT
fuelectenerg-7534	551	5	l.	l.	PROPN
fuelectenerg-7534	551	6	wood	wood	PROPN
fuelectenerg-7534	551	7	,	,	PUNCT
fuelectenerg-7534	551	8	“	"	PUNCT
fuelectenerg-7534	551	9	global	global	ADJ
fuelectenerg-7534	551	10	radio	radio	NOUN
fuelectenerg-7534	551	11	frequency	frequency	NOUN
fuelectenerg-7534	551	12	(	(	PUNCT
fuelectenerg-7534	551	13	rf	rf	NOUN
fuelectenerg-7534	551	14	)	)	PUNCT
fuelectenerg-7534	551	15	mems	mem	NOUN
fuelectenerg-7534	551	16	market	market	NOUN
fuelectenerg-7534	551	17	2019	2019	NUM
fuelectenerg-7534	551	18	-	-	SYM
fuelectenerg-7534	551	19	2023	2023	NUM
fuelectenerg-7534	551	20	:	:	PUNCT
fuelectenerg-7534	551	21	expected	expect	VERB
fuelectenerg-7534	551	22	to	to	PART
fuelectenerg-7534	551	23	grow	grow	VERB
fuelectenerg-7534	551	24	at	at	ADP
fuelectenerg-7534	551	25	a	a	DET
fuelectenerg-7534	551	26	cagr	cagr	NOUN
fuelectenerg-7534	551	27	of	of	ADP
fuelectenerg-7534	551	28	approx	approx	PROPN
fuelectenerg-7534	551	29	37	37	NUM
fuelectenerg-7534	551	30	%	%	NOUN
fuelectenerg-7534	551	31	,	,	PUNCT
fuelectenerg-7534	551	32	with	with	ADP
fuelectenerg-7534	551	33	aac	aac	NOUN
fuelectenerg-7534	551	34	technologies	technology	NOUN
fuelectenerg-7534	551	35	,	,	PUNCT
fuelectenerg-7534	551	36	analog	analog	NOUN
fuelectenerg-7534	551	37	devices	device	NOUN
fuelectenerg-7534	551	38	,	,	PUNCT
fuelectenerg-7534	551	39	broadcom	broadcom	PROPN
fuelectenerg-7534	551	40	,	,	PUNCT
fuelectenerg-7534	551	41	cavendish	cavendish	PROPN
fuelectenerg-7534	551	42	kinetics	kinetics	PROPN
fuelectenerg-7534	551	43	,	,	PUNCT
fuelectenerg-7534	551	44	and	and	CCONJ
fuelectenerg-7534	551	45	qorvo	qorvo	NOUN
fuelectenerg-7534	551	46	at	at	ADP
fuelectenerg-7534	551	47	the	the	DET
fuelectenerg-7534	551	48	forefrontresearchandmarkets.com	forefrontresearchandmarkets.com	NOUN
fuelectenerg-7534	551	49	”	"	PUNCT
fuelectenerg-7534	551	50	,	,	PUNCT
fuelectenerg-7534	551	51	[	[	X
fuelectenerg-7534	551	52	online	online	X
fuelectenerg-7534	551	53	]	]	X
fuelectenerg-7534	551	54	,	,	PUNCT
fuelectenerg-7534	551	55	accessed	access	VERB
fuelectenerg-7534	551	56	:	:	PUNCT
fuelectenerg-7534	551	57	19	19	NUM
fuelectenerg-7534	551	58	november	november	NOUN
fuelectenerg-7534	551	59	2020	2020	NUM
fuelectenerg-7534	551	60	,	,	PUNCT
fuelectenerg-7534	551	61	https://www.businesswire.com/news/	https://www.businesswire.com/news/	DET
fuelectenerg-7534	551	62	home/20190221005400	home/20190221005400	NOUN
fuelectenerg-7534	551	63	/	/	SYM
fuelectenerg-7534	551	64	en	en	ADP
fuelectenerg-7534	551	65	/	/	SYM
fuelectenerg-7534	551	66	global	global	ADJ
fuelectenerg-7534	551	67	-	-	PUNCT
fuelectenerg-7534	551	68	radio	radio	NOUN
fuelectenerg-7534	551	69	-	-	PUNCT
fuelectenerg-7534	551	70	frequency	frequency	NOUN
fuelectenerg-7534	551	71	-	-	PUNCT
fuelectenerg-7534	551	72	rf	rf	NOUN
fuelectenerg-7534	551	73	-	-	PUNCT
fuelectenerg-7534	551	74	mems	mem	NOUN
fuelectenerg-7534	551	75	-	-	PUNCT
fuelectenerg-7534	551	76	market-2019	market-2019	NOUN
fuelectenerg-7534	551	77	-	-	NOUN
fuelectenerg-7534	551	78	2023/	2023/	NUM
fuelectenerg-7534	551	79	.	.	PUNCT
fuelectenerg-7534	552	1	[	[	X
fuelectenerg-7534	552	2	5	5	NUM
fuelectenerg-7534	552	3	]	]	PUNCT
fuelectenerg-7534	552	4	cavendish	cavendish	PROPN
fuelectenerg-7534	552	5	kinetics	kinetics	PROPN
fuelectenerg-7534	552	6	,	,	PUNCT
fuelectenerg-7534	552	7	“	"	PUNCT
fuelectenerg-7534	552	8	cavendish	cavendish	PROPN
fuelectenerg-7534	552	9	powers	powers	PROPN
fuelectenerg-7534	552	10	nubia	nubia	PROPN
fuelectenerg-7534	552	11	z9	z9	PROPN
fuelectenerg-7534	552	12	:	:	PUNCT
fuelectenerg-7534	552	13	world	world	NOUN
fuelectenerg-7534	552	14	's	's	PART
fuelectenerg-7534	552	15	first	first	ADJ
fuelectenerg-7534	552	16	smartphone	smartphone	NOUN
fuelectenerg-7534	552	17	with	with	ADP
fuelectenerg-7534	552	18	dual	dual	ADJ
fuelectenerg-7534	552	19	antenna	antenna	NOUN
fuelectenerg-7534	552	20	tuning	tune	VERB
fuelectenerg-7534	552	21	,	,	PUNCT
fuelectenerg-7534	552	22	”	"	PUNCT
fuelectenerg-7534	553	1	[	[	X
fuelectenerg-7534	553	2	online	online	X
fuelectenerg-7534	553	3	]	]	X
fuelectenerg-7534	553	4	,	,	PUNCT
fuelectenerg-7534	553	5	accessed	access	VERB
fuelectenerg-7534	553	6	:	:	PUNCT
fuelectenerg-7534	553	7	19	19	NUM
fuelectenerg-7534	553	8	november	november	NOUN
fuelectenerg-7534	553	9	2020	2020	NUM
fuelectenerg-7534	553	10	.	.	PUNCT
fuelectenerg-7534	554	1	https://www.cavendish-kinetics.com/release/cavendish-powersnubia-z9-worlds-first-smartphone-with-dual-antenna-tuning/	https://www.cavendish-kinetics.com/release/cavendish-powersnubia-z9-worlds-first-smartphone-with-dual-antenna-tuning/	PROPN
fuelectenerg-7534	554	2	.	.	PUNCT
fuelectenerg-7534	555	1	[	[	X
fuelectenerg-7534	555	2	6	6	NUM
fuelectenerg-7534	555	3	]	]	PUNCT
fuelectenerg-7534	555	4	j.	j.	PROPN
fuelectenerg-7534	555	5	iannacci	iannacci	PROPN
fuelectenerg-7534	555	6	,	,	PUNCT
fuelectenerg-7534	555	7	“	"	PUNCT
fuelectenerg-7534	555	8	internet	internet	NOUN
fuelectenerg-7534	555	9	of	of	ADP
fuelectenerg-7534	555	10	things	thing	NOUN
fuelectenerg-7534	555	11	(	(	PUNCT
fuelectenerg-7534	555	12	iot	iot	NOUN
fuelectenerg-7534	555	13	)	)	PUNCT
fuelectenerg-7534	555	14	;	;	PUNCT
fuelectenerg-7534	555	15	internet	internet	NOUN
fuelectenerg-7534	555	16	of	of	ADP
fuelectenerg-7534	555	17	everything	everything	PRON
fuelectenerg-7534	555	18	(	(	PUNCT
fuelectenerg-7534	555	19	ioe	ioe	PROPN
fuelectenerg-7534	555	20	)	)	PUNCT
fuelectenerg-7534	555	21	;	;	PUNCT
fuelectenerg-7534	555	22	tactile	tactile	ADJ
fuelectenerg-7534	555	23	internet	internet	NOUN
fuelectenerg-7534	555	24	;	;	PUNCT
fuelectenerg-7534	555	25	5	5	NUM
fuelectenerg-7534	555	26	g	g	PROPN
fuelectenerg-7534	555	27	a	a	PRON
fuelectenerg-7534	555	28	(	(	PUNCT
fuelectenerg-7534	555	29	not	not	PART
fuelectenerg-7534	555	30	so	so	ADV
fuelectenerg-7534	555	31	evanescent	evanescent	NOUN
fuelectenerg-7534	555	32	)	)	PUNCT
fuelectenerg-7534	555	33	unifying	unify	VERB
fuelectenerg-7534	555	34	vision	vision	NOUN
fuelectenerg-7534	555	35	empowered	empower	VERB
fuelectenerg-7534	555	36	by	by	ADP
fuelectenerg-7534	555	37	eh	eh	INTJ
fuelectenerg-7534	555	38	-	-	PUNCT
fuelectenerg-7534	555	39	mems	mem	NOUN
fuelectenerg-7534	555	40	(	(	PUNCT
fuelectenerg-7534	555	41	energy	energy	NOUN
fuelectenerg-7534	555	42	harvesting	harvesting	NOUN
fuelectenerg-7534	555	43	mems	mem	NOUN
fuelectenerg-7534	555	44	)	)	PUNCT
fuelectenerg-7534	555	45	and	and	CCONJ
fuelectenerg-7534	555	46	rf	rf	NOUN
fuelectenerg-7534	555	47	-	-	PUNCT
fuelectenerg-7534	555	48	mems	mems	ADJ
fuelectenerg-7534	555	49	(	(	PUNCT
fuelectenerg-7534	555	50	radio	radio	NOUN
fuelectenerg-7534	555	51	frequency	frequency	NOUN
fuelectenerg-7534	555	52	mems	mem	NOUN
fuelectenerg-7534	555	53	)	)	PUNCT
fuelectenerg-7534	555	54	,	,	PUNCT
fuelectenerg-7534	555	55	”	"	PUNCT
fuelectenerg-7534	555	56	sensors	sensor	NOUN
fuelectenerg-7534	555	57	and	and	CCONJ
fuelectenerg-7534	555	58	actuators	actuator	NOUN
fuelectenerg-7534	555	59	a	a	DET
fuelectenerg-7534	555	60	:	:	PUNCT
fuelectenerg-7534	555	61	physical	physical	ADJ
fuelectenerg-7534	555	62	,	,	PUNCT
fuelectenerg-7534	555	63	vol	vol	NOUN
fuelectenerg-7534	555	64	.	.	PROPN
fuelectenerg-7534	555	65	272	272	NUM
fuelectenerg-7534	555	66	,	,	PUNCT
fuelectenerg-7534	555	67	no	no	INTJ
fuelectenerg-7534	555	68	.	.	NOUN
fuelectenerg-7534	555	69	02	02	NUM
fuelectenerg-7534	555	70	,	,	PUNCT
fuelectenerg-7534	555	71	2018	2018	NUM
fuelectenerg-7534	555	72	.	.	PUNCT
fuelectenerg-7534	556	1	[	[	X
fuelectenerg-7534	556	2	7	7	X
fuelectenerg-7534	556	3	]	]	PUNCT
fuelectenerg-7534	556	4	j.	j.	PROPN
fuelectenerg-7534	556	5	rodriguez	rodriguez	PROPN
fuelectenerg-7534	556	6	.	.	PUNCT
fuelectenerg-7534	557	1	fundamentals	fundamental	NOUN
fuelectenerg-7534	557	2	of	of	ADP
fuelectenerg-7534	557	3	5	5	NUM
fuelectenerg-7534	557	4	g	g	NOUN
fuelectenerg-7534	557	5	mobile	mobile	ADJ
fuelectenerg-7534	557	6	networks	network	NOUN
fuelectenerg-7534	557	7	.	.	PUNCT
fuelectenerg-7534	558	1	wiley	wiley	PROPN
fuelectenerg-7534	558	2	,	,	PUNCT
fuelectenerg-7534	558	3	2015	2015	NUM
fuelectenerg-7534	558	4	.	.	PUNCT
fuelectenerg-7534	559	1	[	[	X
fuelectenerg-7534	559	2	8	8	NUM
fuelectenerg-7534	559	3	]	]	SYM
fuelectenerg-7534	559	4	gsm	gsm	PROPN
fuelectenerg-7534	559	5	association	association	NOUN
fuelectenerg-7534	559	6	.	.	PUNCT
fuelectenerg-7534	560	1	5	5	NUM
fuelectenerg-7534	560	2	g	g	NOUN
fuelectenerg-7534	560	3	spectrum	spectrum	NOUN
fuelectenerg-7534	560	4	public	public	ADJ
fuelectenerg-7534	560	5	policy	policy	NOUN
fuelectenerg-7534	560	6	position	position	NOUN
fuelectenerg-7534	560	7	.	.	PUNCT
fuelectenerg-7534	561	1	[	[	X
fuelectenerg-7534	561	2	online	online	X
fuelectenerg-7534	561	3	]	]	X
fuelectenerg-7534	561	4	,	,	PUNCT
fuelectenerg-7534	561	5	accessed	access	VERB
fuelectenerg-7534	561	6	:	:	PUNCT
fuelectenerg-7534	561	7	19	19	NUM
fuelectenerg-7534	561	8	november	november	NOUN
fuelectenerg-7534	561	9	2020	2020	NUM
fuelectenerg-7534	561	10	.	.	PUNCT
fuelectenerg-7534	562	1	https://www.gsma.com/spectrum/wp-content/uploads/2020/03/5g-spectrum-positions.pdf	https://www.gsma.com/spectrum/wp-content/uploads/2020/03/5g-spectrum-positions.pdf	PROPN
fuelectenerg-7534	562	2	.	.	PUNCT
fuelectenerg-7534	563	1	[	[	X
fuelectenerg-7534	563	2	9	9	NUM
fuelectenerg-7534	563	3	]	]	PUNCT
fuelectenerg-7534	563	4	j.	j.	PROPN
fuelectenerg-7534	563	5	iannacci	iannacci	PROPN
fuelectenerg-7534	563	6	,	,	PUNCT
fuelectenerg-7534	563	7	“	"	PUNCT
fuelectenerg-7534	563	8	rf	rf	ADJ
fuelectenerg-7534	563	9	-	-	PUNCT
fuelectenerg-7534	563	10	mems	mems	ADJ
fuelectenerg-7534	563	11	technology	technology	NOUN
fuelectenerg-7534	563	12	:	:	PUNCT
fuelectenerg-7534	563	13	an	an	DET
fuelectenerg-7534	563	14	enabling	enable	VERB
fuelectenerg-7534	563	15	solution	solution	NOUN
fuelectenerg-7534	563	16	in	in	ADP
fuelectenerg-7534	563	17	the	the	DET
fuelectenerg-7534	563	18	transition	transition	NOUN
fuelectenerg-7534	563	19	from	from	ADP
fuelectenerg-7534	563	20	4g	4g	NOUN
fuelectenerg-7534	563	21	-	-	PUNCT
fuelectenerg-7534	563	22	lte	lte	PROPN
fuelectenerg-7534	563	23	to	to	ADP
fuelectenerg-7534	563	24	5	5	NUM
fuelectenerg-7534	563	25	g	g	NOUN
fuelectenerg-7534	563	26	mobile	mobile	ADJ
fuelectenerg-7534	563	27	applications	application	NOUN
fuelectenerg-7534	563	28	,	,	PUNCT
fuelectenerg-7534	563	29	”	"	PUNCT
fuelectenerg-7534	563	30	in	in	ADP
fuelectenerg-7534	563	31	2017	2017	NUM
fuelectenerg-7534	563	32	ieee	ieee	NOUN
fuelectenerg-7534	563	33	sensors	sensor	NOUN
fuelectenerg-7534	563	34	,	,	PUNCT
fuelectenerg-7534	563	35	2017	2017	NUM
fuelectenerg-7534	563	36	,	,	PUNCT
fuelectenerg-7534	563	37	pp	pp	ADJ
fuelectenerg-7534	563	38	.	.	PUNCT
fuelectenerg-7534	564	1	1–3	1–3	NOUN
fuelectenerg-7534	564	2	.	.	PUNCT
fuelectenerg-7534	565	1	[	[	X
fuelectenerg-7534	565	2	10	10	NUM
fuelectenerg-7534	565	3	]	]	X
fuelectenerg-7534	565	4	j.	j.	PROPN
fuelectenerg-7534	565	5	iannacci	iannacci	PROPN
fuelectenerg-7534	565	6	,	,	PUNCT
fuelectenerg-7534	565	7	“	"	PUNCT
fuelectenerg-7534	565	8	rf	rf	NOUN
fuelectenerg-7534	565	9	-	-	NOUN
fuelectenerg-7534	565	10	mems	mem	NOUN
fuelectenerg-7534	565	11	for	for	ADP
fuelectenerg-7534	565	12	high	high	ADJ
fuelectenerg-7534	565	13	-	-	PUNCT
fuelectenerg-7534	565	14	performance	performance	NOUN
fuelectenerg-7534	565	15	and	and	CCONJ
fuelectenerg-7534	565	16	widely	widely	ADV
fuelectenerg-7534	565	17	reconfigurable	reconfigurable	ADJ
fuelectenerg-7534	565	18	passive	passive	ADJ
fuelectenerg-7534	565	19	components	component	NOUN
fuelectenerg-7534	565	20	a	a	DET
fuelectenerg-7534	565	21	review	review	NOUN
fuelectenerg-7534	565	22	with	with	ADP
fuelectenerg-7534	565	23	focus	focus	NOUN
fuelectenerg-7534	565	24	on	on	ADP
fuelectenerg-7534	565	25	future	future	ADJ
fuelectenerg-7534	565	26	telecommunications	telecommunication	NOUN
fuelectenerg-7534	565	27	,	,	PUNCT
fuelectenerg-7534	565	28	internet	internet	NOUN
fuelectenerg-7534	565	29	of	of	ADP
fuelectenerg-7534	565	30	things	thing	NOUN
fuelectenerg-7534	565	31	(	(	PUNCT
fuelectenerg-7534	565	32	iot	iot	NOUN
fuelectenerg-7534	565	33	)	)	PUNCT
fuelectenerg-7534	565	34	and	and	CCONJ
fuelectenerg-7534	565	35	5	5	NUM
fuelectenerg-7534	565	36	g	g	NOUN
fuelectenerg-7534	565	37	applications	application	NOUN
fuelectenerg-7534	565	38	”	"	PUNCT
fuelectenerg-7534	565	39	,	,	PUNCT
fuelectenerg-7534	565	40	journal	journal	NOUN
fuelectenerg-7534	565	41	of	of	ADP
fuelectenerg-7534	565	42	king	king	PROPN
fuelectenerg-7534	565	43	saud	saud	PROPN
fuelectenerg-7534	565	44	university	university	PROPN
fuelectenerg-7534	565	45	science	science	NOUN
fuelectenerg-7534	565	46	,	,	PUNCT
fuelectenerg-7534	565	47	vol	vol	NOUN
fuelectenerg-7534	565	48	.	.	PROPN
fuelectenerg-7534	565	49	29	29	NUM
fuelectenerg-7534	565	50	,	,	PUNCT
fuelectenerg-7534	565	51	no	no	INTJ
fuelectenerg-7534	565	52	.	.	NOUN
fuelectenerg-7534	565	53	4	4	NUM
fuelectenerg-7534	565	54	,	,	PUNCT
fuelectenerg-7534	565	55	pp	pp	ADJ
fuelectenerg-7534	565	56	.	.	PUNCT
fuelectenerg-7534	566	1	436–443	436–443	NUM
fuelectenerg-7534	566	2	,	,	PUNCT
fuelectenerg-7534	566	3	2017	2017	NUM
fuelectenerg-7534	566	4	.	.	PUNCT
fuelectenerg-7534	567	1	si	si	X
fuelectenerg-7534	567	2	:	:	PUNCT
fuelectenerg-7534	567	3	smart	smart	ADJ
fuelectenerg-7534	567	4	materials	material	NOUN
fuelectenerg-7534	567	5	and	and	CCONJ
fuelectenerg-7534	567	6	applications	application	NOUN
fuelectenerg-7534	567	7	of	of	ADP
fuelectenerg-7534	567	8	new	new	ADJ
fuelectenerg-7534	567	9	materials	material	NOUN
fuelectenerg-7534	567	10	.	.	PUNCT
fuelectenerg-7534	568	1	[	[	X
fuelectenerg-7534	568	2	11	11	NUM
fuelectenerg-7534	568	3	]	]	PUNCT
fuelectenerg-7534	568	4	l.	l.	PROPN
fuelectenerg-7534	568	5	ma	ma	PROPN
fuelectenerg-7534	568	6	,	,	PUNCT
fuelectenerg-7534	568	7	n.	n.	PROPN
fuelectenerg-7534	568	8	soin	soin	PROPN
fuelectenerg-7534	568	9	,	,	PUNCT
fuelectenerg-7534	568	10	m.	m.	NOUN
fuelectenerg-7534	568	11	h.	h.	PROPN
fuelectenerg-7534	568	12	mohd	mohd	PROPN
fuelectenerg-7534	568	13	daut	daut	PROPN
fuelectenerg-7534	568	14	,	,	PUNCT
fuelectenerg-7534	568	15	and	and	CCONJ
fuelectenerg-7534	568	16	s.	s.	PROPN
fuelectenerg-7534	568	17	f.	f.	PROPN
fuelectenerg-7534	568	18	wan	wan	PROPN
fuelectenerg-7534	568	19	muhamad	muhamad	PROPN
fuelectenerg-7534	568	20	hatta	hatta	PROPN
fuelectenerg-7534	568	21	,	,	PUNCT
fuelectenerg-7534	568	22	“	"	PUNCT
fuelectenerg-7534	568	23	comprehensive	comprehensive	ADJ
fuelectenerg-7534	568	24	study	study	NOUN
fuelectenerg-7534	568	25	on	on	ADP
fuelectenerg-7534	568	26	rf	rf	ADJ
fuelectenerg-7534	568	27	-	-	PUNCT
fuelectenerg-7534	568	28	mems	mems	ADJ
fuelectenerg-7534	568	29	switches	switch	NOUN
fuelectenerg-7534	568	30	used	use	VERB
fuelectenerg-7534	568	31	for	for	ADP
fuelectenerg-7534	568	32	5	5	NUM
fuelectenerg-7534	568	33	g	g	PROPN
fuelectenerg-7534	568	34	scenario	scenario	NOUN
fuelectenerg-7534	568	35	”	"	PUNCT
fuelectenerg-7534	568	36	,	,	PUNCT
fuelectenerg-7534	568	37	ieee	ieee	NOUN
fuelectenerg-7534	568	38	access	access	NOUN
fuelectenerg-7534	568	39	,	,	PUNCT
fuelectenerg-7534	568	40	vol	vol	NOUN
fuelectenerg-7534	568	41	.	.	PROPN
fuelectenerg-7534	568	42	7	7	NUM
fuelectenerg-7534	568	43	,	,	PUNCT
fuelectenerg-7534	568	44	pp	pp	ADJ
fuelectenerg-7534	568	45	.	.	PUNCT
fuelectenerg-7534	569	1	107506	107506	NUM
fuelectenerg-7534	569	2	-	-	SYM
fuelectenerg-7534	569	3	107522	107522	NUM
fuelectenerg-7534	569	4	,	,	PUNCT
fuelectenerg-7534	569	5	2019	2019	NUM
fuelectenerg-7534	569	6	.	.	PUNCT
fuelectenerg-7534	570	1	[	[	X
fuelectenerg-7534	570	2	12	12	NUM
fuelectenerg-7534	570	3	]	]	X
fuelectenerg-7534	570	4	y.	y.	PROPN
fuelectenerg-7534	570	5	yuan	yuan	PROPN
fuelectenerg-7534	570	6	-	-	PUNCT
fuelectenerg-7534	570	7	wei	wei	PROPN
fuelectenerg-7534	570	8	,	,	PUNCT
fuelectenerg-7534	570	9	z.	z.	PROPN
fuelectenerg-7534	570	10	jian	jian	PROPN
fuelectenerg-7534	570	11	,	,	PUNCT
fuelectenerg-7534	570	12	j.	j.	PROPN
fuelectenerg-7534	570	13	shi	shi	PROPN
fuelectenerg-7534	570	14	-	-	PUNCT
fuelectenerg-7534	570	15	xing	xing	PROPN
fuelectenerg-7534	570	16	,	,	PUNCT
fuelectenerg-7534	570	17	and	and	CCONJ
fuelectenerg-7534	570	18	y.	y.	PROPN
fuelectenerg-7534	570	19	shi	shi	PROPN
fuelectenerg-7534	570	20	,	,	PUNCT
fuelectenerg-7534	570	21	“	"	PUNCT
fuelectenerg-7534	570	22	a	a	DET
fuelectenerg-7534	570	23	high	high	ADJ
fuelectenerg-7534	570	24	isolation	isolation	NOUN
fuelectenerg-7534	570	25	series	series	NOUN
fuelectenerg-7534	570	26	-	-	PUNCT
fuelectenerg-7534	570	27	shunt	shunt	NOUN
fuelectenerg-7534	570	28	rf	rf	NOUN
fuelectenerg-7534	570	29	mems	mem	NOUN
fuelectenerg-7534	570	30	switch	switch	NOUN
fuelectenerg-7534	570	31	”	"	PUNCT
fuelectenerg-7534	570	32	,	,	PUNCT
fuelectenerg-7534	570	33	sensors	sensor	NOUN
fuelectenerg-7534	570	34	,	,	PUNCT
fuelectenerg-7534	570	35	vol	vol	NOUN
fuelectenerg-7534	570	36	.	.	PROPN
fuelectenerg-7534	570	37	9	9	NUM
fuelectenerg-7534	570	38	,	,	PUNCT
fuelectenerg-7534	570	39	no	no	INTJ
fuelectenerg-7534	570	40	.	.	NOUN
fuelectenerg-7534	570	41	6	6	NUM
fuelectenerg-7534	570	42	,	,	PUNCT
fuelectenerg-7534	570	43	pp	pp	ADJ
fuelectenerg-7534	570	44	.	.	PUNCT
fuelectenerg-7534	570	45	4455–4464	4455–4464	NUM
fuelectenerg-7534	570	46	,	,	PUNCT
fuelectenerg-7534	570	47	2009	2009	NUM
fuelectenerg-7534	570	48	.	.	PUNCT
fuelectenerg-7534	571	1	[	[	X
fuelectenerg-7534	571	2	13	13	NUM
fuelectenerg-7534	571	3	]	]	X
fuelectenerg-7534	571	4	j.	j.	PROPN
fuelectenerg-7534	571	5	sun	sun	PROPN
fuelectenerg-7534	571	6	,	,	PUNCT
fuelectenerg-7534	571	7	z.	z.	PROPN
fuelectenerg-7534	571	8	li	li	PROPN
fuelectenerg-7534	571	9	,	,	PUNCT
fuelectenerg-7534	571	10	j	j	PROPN
fuelectenerg-7534	571	11	,	,	PUNCT
fuelectenerg-7534	571	12	zhu	zhu	PROPN
fuelectenerg-7534	571	13	,	,	PUNCT
fuelectenerg-7534	571	14	y.	y.	PROPN
fuelectenerg-7534	571	15	yu	yu	PROPN
fuelectenerg-7534	571	16	,	,	PUNCT
fuelectenerg-7534	571	17	and	and	CCONJ
fuelectenerg-7534	571	18	l.	l.	PROPN
fuelectenerg-7534	571	19	jiang	jiang	PROPN
fuelectenerg-7534	571	20	,	,	PUNCT
fuelectenerg-7534	571	21	“	"	PUNCT
fuelectenerg-7534	571	22	design	design	NOUN
fuelectenerg-7534	571	23	of	of	ADP
fuelectenerg-7534	571	24	dc	dc	PROPN
fuelectenerg-7534	571	25	-	-	PUNCT
fuelectenerg-7534	571	26	contact	contact	NOUN
fuelectenerg-7534	571	27	rf	rf	NOUN
fuelectenerg-7534	571	28	mems	mems	PROPN
fuelectenerg-7534	571	29	switch	switch	VERB
fuelectenerg-7534	571	30	with	with	ADP
fuelectenerg-7534	571	31	temperature	temperature	NOUN
fuelectenerg-7534	571	32	stability	stability	NOUN
fuelectenerg-7534	571	33	”	"	PUNCT
fuelectenerg-7534	571	34	,	,	PUNCT
fuelectenerg-7534	571	35	aip	aip	PROPN
fuelectenerg-7534	571	36	advances	advance	NOUN
fuelectenerg-7534	571	37	,	,	PUNCT
fuelectenerg-7534	571	38	vol	vol	NOUN
fuelectenerg-7534	571	39	.	.	PROPN
fuelectenerg-7534	571	40	5	5	NUM
fuelectenerg-7534	571	41	,	,	PUNCT
fuelectenerg-7534	571	42	march	march	PROPN
fuelectenerg-7534	571	43	2015	2015	NUM
fuelectenerg-7534	571	44	.	.	PUNCT
fuelectenerg-7534	572	1	[	[	X
fuelectenerg-7534	572	2	14	14	NUM
fuelectenerg-7534	572	3	]	]	PUNCT
fuelectenerg-7534	572	4	s.	s.	PROPN
fuelectenerg-7534	572	5	t.	t.	PROPN
fuelectenerg-7534	572	6	wipf	wipf	PROPN
fuelectenerg-7534	572	7	,	,	PUNCT
fuelectenerg-7534	572	8	a.	a.	NOUN
fuelectenerg-7534	572	9	goritz	goritz	PROPN
fuelectenerg-7534	572	10	,	,	PUNCT
fuelectenerg-7534	572	11	m.	m.	NOUN
fuelectenerg-7534	572	12	wietstruck	wietstruck	PROPN
fuelectenerg-7534	572	13	,	,	PUNCT
fuelectenerg-7534	572	14	c.	c.	PROPN
fuelectenerg-7534	572	15	wipf	wipf	PROPN
fuelectenerg-7534	572	16	,	,	PUNCT
fuelectenerg-7534	572	17	b.	b.	PROPN
fuelectenerg-7534	572	18	tillack	tillack	PROPN
fuelectenerg-7534	572	19	,	,	PUNCT
fuelectenerg-7534	572	20	and	and	CCONJ
fuelectenerg-7534	572	21	m.	m.	NOUN
fuelectenerg-7534	572	22	kaynak	kaynak	PROPN
fuelectenerg-7534	572	23	,	,	PUNCT
fuelectenerg-7534	572	24	“	"	PUNCT
fuelectenerg-7534	572	25	d	d	X
fuelectenerg-7534	572	26	-	-	NOUN
fuelectenerg-7534	572	27	band	band	NOUN
fuelectenerg-7534	572	28	rf	rf	NOUN
fuelectenerg-7534	572	29	-	-	PUNCT
fuelectenerg-7534	572	30	mems	mems	ADJ
fuelectenerg-7534	572	31	spdt	spdt	NOUN
fuelectenerg-7534	572	32	switch	switch	NOUN
fuelectenerg-7534	572	33	in	in	ADP
fuelectenerg-7534	572	34	a	a	DET
fuelectenerg-7534	572	35	0.13	0.13	NUM
fuelectenerg-7534	572	36	um	um	INTJ
fuelectenerg-7534	572	37	sige	sige	PROPN
fuelectenerg-7534	572	38	bicmos	bicmos	PROPN
fuelectenerg-7534	572	39	technology	technology	PROPN
fuelectenerg-7534	572	40	”	"	PUNCT
fuelectenerg-7534	572	41	,	,	PUNCT
fuelectenerg-7534	572	42	ieee	ieee	NOUN
fuelectenerg-7534	572	43	microwave	microwave	NOUN
fuelectenerg-7534	572	44	and	and	CCONJ
fuelectenerg-7534	572	45	wireless	wireless	ADJ
fuelectenerg-7534	572	46	components	component	NOUN
fuelectenerg-7534	572	47	letters	letter	NOUN
fuelectenerg-7534	572	48	,	,	PUNCT
fuelectenerg-7534	572	49	vol	vol	NOUN
fuelectenerg-7534	572	50	.	.	PROPN
fuelectenerg-7534	572	51	26	26	NUM
fuelectenerg-7534	572	52	,	,	PUNCT
fuelectenerg-7534	572	53	pp	pp	ADJ
fuelectenerg-7534	572	54	.	.	PUNCT
fuelectenerg-7534	572	55	1002–1004	1002–1004	NUM
fuelectenerg-7534	572	56	,	,	PUNCT
fuelectenerg-7534	572	57	2016	2016	NUM
fuelectenerg-7534	572	58	.	.	PUNCT
fuelectenerg-7534	573	1	[	[	X
fuelectenerg-7534	573	2	15	15	NUM
fuelectenerg-7534	573	3	]	]	X
fuelectenerg-7534	573	4	y.	y.	PROPN
fuelectenerg-7534	573	5	liu	liu	PROPN
fuelectenerg-7534	573	6	,	,	PUNCT
fuelectenerg-7534	573	7	y.	y.	PROPN
fuelectenerg-7534	573	8	bey	bey	PROPN
fuelectenerg-7534	573	9	,	,	PUNCT
fuelectenerg-7534	573	10	and	and	CCONJ
fuelectenerg-7534	573	11	x.	x.	NOUN
fuelectenerg-7534	573	12	liu	liu	PROPN
fuelectenerg-7534	573	13	,	,	PUNCT
fuelectenerg-7534	573	14	“	"	PUNCT
fuelectenerg-7534	573	15	high	high	ADJ
fuelectenerg-7534	573	16	-	-	PUNCT
fuelectenerg-7534	573	17	power	power	NOUN
fuelectenerg-7534	573	18	high	high	ADJ
fuelectenerg-7534	573	19	-	-	PUNCT
fuelectenerg-7534	573	20	isolation	isolation	NOUN
fuelectenerg-7534	573	21	rf	rf	NOUN
fuelectenerg-7534	573	22	-	-	PUNCT
fuelectenerg-7534	573	23	mems	mems	ADJ
fuelectenerg-7534	573	24	switches	switch	NOUN
fuelectenerg-7534	573	25	with	with	ADP
fuelectenerg-7534	573	26	enhanced	enhanced	ADJ
fuelectenerg-7534	573	27	hotswitching	hotswitching	NOUN
fuelectenerg-7534	573	28	reliability	reliability	NOUN
fuelectenerg-7534	573	29	using	use	VERB
fuelectenerg-7534	573	30	a	a	DET
fuelectenerg-7534	573	31	shunt	shunt	NOUN
fuelectenerg-7534	573	32	protection	protection	NOUN
fuelectenerg-7534	573	33	technique	technique	NOUN
fuelectenerg-7534	573	34	”	"	PUNCT
fuelectenerg-7534	573	35	,	,	PUNCT
fuelectenerg-7534	573	36	ieee	ieee	NOUN
fuelectenerg-7534	573	37	transactions	transaction	NOUN
fuelectenerg-7534	573	38	on	on	ADP
fuelectenerg-7534	573	39	microwave	microwave	NOUN
fuelectenerg-7534	573	40	theory	theory	NOUN
fuelectenerg-7534	573	41	and	and	CCONJ
fuelectenerg-7534	573	42	techniques	technique	NOUN
fuelectenerg-7534	573	43	,	,	PUNCT
fuelectenerg-7534	573	44	vol	vol	NOUN
fuelectenerg-7534	573	45	.	.	PROPN
fuelectenerg-7534	573	46	65	65	NUM
fuelectenerg-7534	573	47	,	,	PUNCT
fuelectenerg-7534	573	48	no	no	INTJ
fuelectenerg-7534	573	49	.	.	NOUN
fuelectenerg-7534	573	50	9	9	NUM
fuelectenerg-7534	573	51	,	,	PUNCT
fuelectenerg-7534	573	52	pp	pp	ADJ
fuelectenerg-7534	573	53	.	.	PUNCT
fuelectenerg-7534	574	1	3188–3199	3188–3199	NUM
fuelectenerg-7534	574	2	,	,	PUNCT
fuelectenerg-7534	574	3	2017	2017	NUM
fuelectenerg-7534	574	4	.	.	PUNCT
fuelectenerg-7534	575	1	[	[	X
fuelectenerg-7534	575	2	16	16	NUM
fuelectenerg-7534	575	3	]	]	X
fuelectenerg-7534	575	4	c.	c.	PROPN
fuelectenerg-7534	575	5	chu	chu	PROPN
fuelectenerg-7534	575	6	and	and	CCONJ
fuelectenerg-7534	575	7	x.	x.	PROPN
fuelectenerg-7534	575	8	liao	liao	PROPN
fuelectenerg-7534	575	9	,	,	PUNCT
fuelectenerg-7534	575	10	“	"	PUNCT
fuelectenerg-7534	575	11	one	one	NUM
fuelectenerg-7534	575	12	to	to	ADP
fuelectenerg-7534	575	13	40ghz	40ghz	VERB
fuelectenerg-7534	575	14	ultra	ultra	ADJ
fuelectenerg-7534	575	15	-	-	ADJ
fuelectenerg-7534	575	16	wideband	wideband	ADJ
fuelectenerg-7534	575	17	rf	rf	ADJ
fuelectenerg-7534	575	18	mems	mem	NOUN
fuelectenerg-7534	575	19	direct	direct	ADJ
fuelectenerg-7534	575	20	-	-	PUNCT
fuelectenerg-7534	575	21	contact	contact	NOUN
fuelectenerg-7534	575	22	switch	switch	NOUN
fuelectenerg-7534	575	23	based	base	VERB
fuelectenerg-7534	575	24	on	on	ADP
fuelectenerg-7534	575	25	gaas	gaas	ADJ
fuelectenerg-7534	575	26	mmic	mmic	ADJ
fuelectenerg-7534	575	27	technique	technique	NOUN
fuelectenerg-7534	575	28	”	"	PUNCT
fuelectenerg-7534	575	29	,	,	PUNCT
fuelectenerg-7534	575	30	iet	iet	PROPN
fuelectenerg-7534	575	31	microwaves	microwave	NOUN
fuelectenerg-7534	575	32	,	,	PUNCT
fuelectenerg-7534	575	33	antennas	antennas	NOUN
fuelectenerg-7534	575	34	propagation	propagation	NOUN
fuelectenerg-7534	575	35	,	,	PUNCT
fuelectenerg-7534	575	36	vol	vol	NOUN
fuelectenerg-7534	575	37	.	.	PROPN
fuelectenerg-7534	575	38	12	12	NUM
fuelectenerg-7534	575	39	,	,	PUNCT
fuelectenerg-7534	575	40	no	no	INTJ
fuelectenerg-7534	575	41	.	.	PUNCT
fuelectenerg-7534	575	42	6pp	6pp	ADJ
fuelectenerg-7534	575	43	.	.	PUNCT
fuelectenerg-7534	576	1	879–884	879–884	NUM
fuelectenerg-7534	576	2	,	,	PUNCT
fuelectenerg-7534	576	3	2018	2018	NUM
fuelectenerg-7534	576	4	.	.	PUNCT
fuelectenerg-7534	577	1	[	[	X
fuelectenerg-7534	577	2	17	17	NUM
fuelectenerg-7534	577	3	]	]	PUNCT
fuelectenerg-7534	577	4	s.	s.	PROPN
fuelectenerg-7534	577	5	dey	dey	PROPN
fuelectenerg-7534	577	6	,	,	PUNCT
fuelectenerg-7534	577	7	s.	s.	PROPN
fuelectenerg-7534	577	8	koul	koul	PROPN
fuelectenerg-7534	577	9	,	,	PUNCT
fuelectenerg-7534	577	10	a.	a.	NOUN
fuelectenerg-7534	577	11	poddar	poddar	PROPN
fuelectenerg-7534	577	12	,	,	PUNCT
fuelectenerg-7534	577	13	and	and	CCONJ
fuelectenerg-7534	577	14	u.	u.	PROPN
fuelectenerg-7534	577	15	rohde	rohde	PROPN
fuelectenerg-7534	577	16	,	,	PUNCT
fuelectenerg-7534	577	17	“	"	PUNCT
fuelectenerg-7534	577	18	compact	compact	ADJ
fuelectenerg-7534	577	19	,	,	PUNCT
fuelectenerg-7534	577	20	broadband	broadband	NOUN
fuelectenerg-7534	577	21	and	and	CCONJ
fuelectenerg-7534	577	22	reliable	reliable	ADJ
fuelectenerg-7534	577	23	lateral	lateral	ADJ
fuelectenerg-7534	577	24	mems	mem	NOUN
fuelectenerg-7534	577	25	switching	switch	VERB
fuelectenerg-7534	577	26	networks	network	NOUN
fuelectenerg-7534	577	27	for	for	ADP
fuelectenerg-7534	577	28	5	5	NUM
fuelectenerg-7534	577	29	g	g	PROPN
fuelectenerg-7534	577	30	communications	communication	NOUN
fuelectenerg-7534	577	31	”	"	PUNCT
fuelectenerg-7534	577	32	,	,	PUNCT
fuelectenerg-7534	577	33	progress	progress	NOUN
fuelectenerg-7534	577	34	in	in	ADP
fuelectenerg-7534	577	35	electromagnetics	electromagnetic	NOUN
fuelectenerg-7534	577	36	research	research	PROPN
fuelectenerg-7534	577	37	m	m	PROPN
fuelectenerg-7534	577	38	,	,	PUNCT
fuelectenerg-7534	577	39	vol	vol	NOUN
fuelectenerg-7534	577	40	.	.	PUNCT
fuelectenerg-7534	578	1	86	86	NUM
fuelectenerg-7534	578	2	pp	pp	ADJ
fuelectenerg-7534	578	3	.	.	PUNCT
fuelectenerg-7534	579	1	163–171	163–171	NUM
fuelectenerg-7534	579	2	,	,	PUNCT
fuelectenerg-7534	579	3	2019	2019	NUM
fuelectenerg-7534	579	4	.	.	PUNCT
fuelectenerg-7534	580	1	[	[	X
fuelectenerg-7534	580	2	18	18	NUM
fuelectenerg-7534	580	3	]	]	X
fuelectenerg-7534	580	4	n.	n.	PROPN
fuelectenerg-7534	580	5	narang	narang	PROPN
fuelectenerg-7534	580	6	and	and	CCONJ
fuelectenerg-7534	580	7	p.	p.	PROPN
fuelectenerg-7534	580	8	singh	singh	PROPN
fuelectenerg-7534	580	9	,	,	PUNCT
fuelectenerg-7534	580	10	“	"	PUNCT
fuelectenerg-7534	580	11	metal	metal	NOUN
fuelectenerg-7534	580	12	contact	contact	NOUN
fuelectenerg-7534	580	13	rf	rf	NOUN
fuelectenerg-7534	580	14	mems	mems	PROPN
fuelectenerg-7534	580	15	switch	switch	NOUN
fuelectenerg-7534	580	16	design	design	NOUN
fuelectenerg-7534	580	17	for	for	ADP
fuelectenerg-7534	580	18	high	high	ADJ
fuelectenerg-7534	580	19	performance	performance	NOUN
fuelectenerg-7534	580	20	in	in	ADP
fuelectenerg-7534	580	21	ka	ka	PROPN
fuelectenerg-7534	580	22	band	band	PROPN
fuelectenerg-7534	580	23	”	"	PUNCT
fuelectenerg-7534	580	24	,	,	PUNCT
fuelectenerg-7534	580	25	in	in	ADP
fuelectenerg-7534	580	26	proceedings	proceeding	NOUN
fuelectenerg-7534	580	27	of	of	ADP
fuelectenerg-7534	580	28	the	the	DET
fuelectenerg-7534	580	29	iop	iop	PROPN
fuelectenerg-7534	580	30	conference	conference	PROPN
fuelectenerg-7534	580	31	series	series	NOUN
fuelectenerg-7534	580	32	:	:	PUNCT
fuelectenerg-7534	580	33	materials	material	NOUN
fuelectenerg-7534	580	34	science	science	NOUN
fuelectenerg-7534	580	35	and	and	CCONJ
fuelectenerg-7534	580	36	engineering	engineering	NOUN
fuelectenerg-7534	580	37	,	,	PUNCT
fuelectenerg-7534	580	38	vol	vol	NOUN
fuelectenerg-7534	580	39	.	.	PROPN
fuelectenerg-7534	580	40	872	872	NUM
fuelectenerg-7534	580	41	,	,	PUNCT
fuelectenerg-7534	580	42	p.	p.	NOUN
fuelectenerg-7534	580	43	012020	012020	NUM
fuelectenerg-7534	580	44	,	,	PUNCT
fuelectenerg-7534	580	45	06	06	NUM
fuelectenerg-7534	580	46	2020	2020	NUM
fuelectenerg-7534	580	47	.	.	PUNCT
fuelectenerg-7534	581	1	[	[	X
fuelectenerg-7534	581	2	19	19	NUM
fuelectenerg-7534	581	3	]	]	X
fuelectenerg-7534	581	4	h.	h.	PROPN
fuelectenerg-7534	581	5	yang	yang	PROPN
fuelectenerg-7534	581	6	,	,	PUNCT
fuelectenerg-7534	581	7	h.	h.	PROPN
fuelectenerg-7534	581	8	zareie	zareie	PROPN
fuelectenerg-7534	581	9	,	,	PUNCT
fuelectenerg-7534	581	10	and	and	CCONJ
fuelectenerg-7534	581	11	g.	g.	PROPN
fuelectenerg-7534	581	12	m.	m.	PROPN
fuelectenerg-7534	581	13	rebeiz	rebeiz	PROPN
fuelectenerg-7534	581	14	,	,	PUNCT
fuelectenerg-7534	581	15	“	"	PUNCT
fuelectenerg-7534	581	16	a	a	DET
fuelectenerg-7534	581	17	high	high	ADJ
fuelectenerg-7534	581	18	power	power	NOUN
fuelectenerg-7534	581	19	stress	stress	NOUN
fuelectenerg-7534	581	20	-	-	PUNCT
fuelectenerg-7534	581	21	gradient	gradient	NOUN
fuelectenerg-7534	581	22	resilient	resilient	ADJ
fuelectenerg-7534	581	23	rf	rf	ADJ
fuelectenerg-7534	581	24	mems	mem	NOUN
fuelectenerg-7534	581	25	capacitive	capacitive	ADJ
fuelectenerg-7534	581	26	switch	switch	NOUN
fuelectenerg-7534	581	27	”	"	PUNCT
fuelectenerg-7534	581	28	,	,	PUNCT
fuelectenerg-7534	581	29	journal	journal	NOUN
fuelectenerg-7534	581	30	of	of	ADP
fuelectenerg-7534	581	31	microelectromechanical	microelectromechanical	ADJ
fuelectenerg-7534	581	32	systems	system	NOUN
fuelectenerg-7534	581	33	,	,	PUNCT
fuelectenerg-7534	581	34	vol	vol	NOUN
fuelectenerg-7534	581	35	.	.	PROPN
fuelectenerg-7534	581	36	24	24	NUM
fuelectenerg-7534	581	37	,	,	PUNCT
fuelectenerg-7534	581	38	no	no	INTJ
fuelectenerg-7534	581	39	.	.	NOUN
fuelectenerg-7534	581	40	3	3	NUM
fuelectenerg-7534	581	41	,	,	PUNCT
fuelectenerg-7534	581	42	pp	pp	ADJ
fuelectenerg-7534	581	43	.	.	PUNCT
fuelectenerg-7534	582	1	599–607	599–607	NUM
fuelectenerg-7534	582	2	,	,	PUNCT
fuelectenerg-7534	582	3	2015	2015	NUM
fuelectenerg-7534	582	4	.	.	PUNCT
fuelectenerg-7534	583	1	[	[	X
fuelectenerg-7534	583	2	20	20	NUM
fuelectenerg-7534	583	3	]	]	PUNCT
fuelectenerg-7534	583	4	k.	k.	PROPN
fuelectenerg-7534	583	5	demirel	demirel	PROPN
fuelectenerg-7534	583	6	,	,	PUNCT
fuelectenerg-7534	583	7	e.	e.	PROPN
fuelectenerg-7534	583	8	yazgan	yazgan	PROPN
fuelectenerg-7534	583	9	,	,	PUNCT
fuelectenerg-7534	583	10	s.	s.	PROPN
fuelectenerg-7534	583	11	demir	demir	PROPN
fuelectenerg-7534	583	12	,	,	PUNCT
fuelectenerg-7534	583	13	and	and	CCONJ
fuelectenerg-7534	583	14	t.	t.	PROPN
fuelectenerg-7534	583	15	akin	akin	ADJ
fuelectenerg-7534	583	16	,	,	PUNCT
fuelectenerg-7534	583	17	“	"	PUNCT
fuelectenerg-7534	583	18	a	a	DET
fuelectenerg-7534	583	19	folded	fold	VERB
fuelectenerg-7534	583	20	leg	leg	NOUN
fuelectenerg-7534	583	21	ka	ka	NOUN
fuelectenerg-7534	583	22	-	-	PUNCT
fuelectenerg-7534	583	23	band	band	NOUN
fuelectenerg-7534	583	24	rf	rf	NOUN
fuelectenerg-7534	583	25	mems	mem	NOUN
fuelectenerg-7534	583	26	shunt	shunt	NOUN
fuelectenerg-7534	583	27	switch	switch	NOUN
fuelectenerg-7534	583	28	with	with	ADP
fuelectenerg-7534	583	29	amorphous	amorphous	ADJ
fuelectenerg-7534	583	30	silicon	silicon	NOUN
fuelectenerg-7534	583	31	(	(	PUNCT
fuelectenerg-7534	583	32	a	a	PROPN
fuelectenerg-7534	583	33	-	-	PUNCT
fuelectenerg-7534	583	34	si	si	NOUN
fuelectenerg-7534	583	35	)	)	PUNCT
fuelectenerg-7534	583	36	sacrificial	sacrificial	ADJ
fuelectenerg-7534	583	37	layer	layer	NOUN
fuelectenerg-7534	583	38	”	"	PUNCT
fuelectenerg-7534	583	39	,	,	PUNCT
fuelectenerg-7534	583	40	microsystem	microsystem	NOUN
fuelectenerg-7534	583	41	technologies	technology	NOUN
fuelectenerg-7534	583	42	,	,	PUNCT
fuelectenerg-7534	583	43	vol	vol	NOUN
fuelectenerg-7534	583	44	.	.	PROPN
fuelectenerg-7534	583	45	23	23	NUM
fuelectenerg-7534	583	46	,	,	PUNCT
fuelectenerg-7534	583	47	pp	pp	ADJ
fuelectenerg-7534	583	48	.	.	PUNCT
fuelectenerg-7534	584	1	1191–1200	1191–1200	NUM
fuelectenerg-7534	584	2	,	,	PUNCT
fuelectenerg-7534	584	3	2017	2017	NUM
fuelectenerg-7534	584	4	.	.	PUNCT
fuelectenerg-7534	585	1	[	[	X
fuelectenerg-7534	585	2	21	21	NUM
fuelectenerg-7534	585	3	]	]	PUNCT
fuelectenerg-7534	585	4	m.	m.	PROPN
fuelectenerg-7534	585	5	li	li	PROPN
fuelectenerg-7534	585	6	,	,	PUNCT
fuelectenerg-7534	585	7	j.	j.	PROPN
fuelectenerg-7534	585	8	zhao	zhao	PROPN
fuelectenerg-7534	585	9	,	,	PUNCT
fuelectenerg-7534	585	10	z.	z.	PROPN
fuelectenerg-7534	585	11	you	you	PRON
fuelectenerg-7534	585	12	,	,	PUNCT
fuelectenerg-7534	585	13	and	and	CCONJ
fuelectenerg-7534	585	14	g.	g.	PROPN
fuelectenerg-7534	585	15	zhao	zhao	PROPN
fuelectenerg-7534	585	16	,	,	PUNCT
fuelectenerg-7534	585	17	“	"	PUNCT
fuelectenerg-7534	585	18	design	design	NOUN
fuelectenerg-7534	585	19	and	and	CCONJ
fuelectenerg-7534	585	20	fabrication	fabrication	NOUN
fuelectenerg-7534	585	21	of	of	ADP
fuelectenerg-7534	585	22	a	a	DET
fuelectenerg-7534	585	23	low	low	ADJ
fuelectenerg-7534	585	24	insertion	insertion	NOUN
fuelectenerg-7534	585	25	loss	loss	NOUN
fuelectenerg-7534	585	26	capacitive	capacitive	ADJ
fuelectenerg-7534	585	27	rf	rf	NOUN
fuelectenerg-7534	585	28	mems	mem	NOUN
fuelectenerg-7534	585	29	switch	switch	VERB
fuelectenerg-7534	585	30	with	with	ADP
fuelectenerg-7534	585	31	novel	novel	ADJ
fuelectenerg-7534	585	32	micro	micro	NOUN
fuelectenerg-7534	585	33	-	-	NOUN
fuelectenerg-7534	585	34	structures	structure	NOUN
fuelectenerg-7534	585	35	for	for	ADP
fuelectenerg-7534	585	36	actuation	actuation	NOUN
fuelectenerg-7534	585	37	”	"	PUNCT
fuelectenerg-7534	585	38	,	,	PUNCT
fuelectenerg-7534	585	39	solid	solid	ADJ
fuelectenerg-7534	585	40	-	-	PUNCT
fuelectenerg-7534	585	41	state	state	NOUN
fuelectenerg-7534	585	42	electronics	electronic	NOUN
fuelectenerg-7534	585	43	,	,	PUNCT
fuelectenerg-7534	585	44	vol	vol	NOUN
fuelectenerg-7534	585	45	.	.	PUNCT
fuelectenerg-7534	586	1	127	127	NUM
fuelectenerg-7534	586	2	,	,	PUNCT
fuelectenerg-7534	586	3	pp	pp	ADJ
fuelectenerg-7534	586	4	.	.	PUNCT
fuelectenerg-7534	587	1	32–37	32–37	NUM
fuelectenerg-7534	587	2	,	,	PUNCT
fuelectenerg-7534	587	3	2017	2017	NUM
fuelectenerg-7534	587	4	.	.	PUNCT
fuelectenerg-7534	588	1	[	[	X
fuelectenerg-7534	588	2	22	22	NUM
fuelectenerg-7534	588	3	]	]	X
fuelectenerg-7534	588	4	g.	g.	PROPN
fuelectenerg-7534	588	5	s.	s.	PROPN
fuelectenerg-7534	588	6	kondaveeti	kondaveeti	PROPN
fuelectenerg-7534	588	7	,	,	PUNCT
fuelectenerg-7534	588	8	k.	k.	PROPN
fuelectenerg-7534	588	9	guha	guha	PROPN
fuelectenerg-7534	588	10	,	,	PUNCT
fuelectenerg-7534	588	11	s.	s.	PROPN
fuelectenerg-7534	588	12	r.	r.	PROPN
fuelectenerg-7534	588	13	karumuri	karumuri	PROPN
fuelectenerg-7534	588	14	,	,	PUNCT
fuelectenerg-7534	588	15	and	and	CCONJ
fuelectenerg-7534	588	16	a.	a.	PROPN
fuelectenerg-7534	588	17	elsinawi	elsinawi	PROPN
fuelectenerg-7534	588	18	,	,	PUNCT
fuelectenerg-7534	588	19	“	"	PUNCT
fuelectenerg-7534	588	20	design	design	NOUN
fuelectenerg-7534	588	21	of	of	ADP
fuelectenerg-7534	588	22	a	a	DET
fuelectenerg-7534	588	23	novel	novel	ADJ
fuelectenerg-7534	588	24	structure	structure	NOUN
fuelectenerg-7534	588	25	capacitive	capacitive	ADJ
fuelectenerg-7534	588	26	rf	rf	NOUN
fuelectenerg-7534	588	27	mems	mem	NOUN
fuelectenerg-7534	588	28	switch	switch	NOUN
fuelectenerg-7534	588	29	to	to	PART
fuelectenerg-7534	588	30	improve	improve	VERB
fuelectenerg-7534	588	31	performance	performance	NOUN
fuelectenerg-7534	588	32	parameters	parameter	NOUN
fuelectenerg-7534	588	33	”	"	PUNCT
fuelectenerg-7534	588	34	,	,	PUNCT
fuelectenerg-7534	588	35	iet	iet	PROPN
fuelectenerg-7534	588	36	circuits	circuit	NOUN
fuelectenerg-7534	588	37	,	,	PUNCT
fuelectenerg-7534	588	38	devices	device	NOUN
fuelectenerg-7534	588	39	systems	system	NOUN
fuelectenerg-7534	588	40	,	,	PUNCT
fuelectenerg-7534	588	41	vol	vol	NOUN
fuelectenerg-7534	588	42	.	.	PROPN
fuelectenerg-7534	588	43	13	13	NUM
fuelectenerg-7534	588	44	,	,	PUNCT
fuelectenerg-7534	588	45	no	no	INTJ
fuelectenerg-7534	588	46	.	.	NOUN
fuelectenerg-7534	588	47	7	7	NUM
fuelectenerg-7534	588	48	,	,	PUNCT
fuelectenerg-7534	588	49	pp	pp	ADJ
fuelectenerg-7534	588	50	.	.	PUNCT
fuelectenerg-7534	589	1	1093–1101	1093–1101	NUM
fuelectenerg-7534	589	2	,	,	PUNCT
fuelectenerg-7534	589	3	2019	2019	NUM
fuelectenerg-7534	589	4	.	.	PUNCT
fuelectenerg-7534	590	1	[	[	X
fuelectenerg-7534	590	2	23	23	NUM
fuelectenerg-7534	590	3	]	]	X
fuelectenerg-7534	590	4	u.	u.	PROPN
fuelectenerg-7534	590	5	chae	chae	PROPN
fuelectenerg-7534	590	6	,	,	PUNCT
fuelectenerg-7534	590	7	h.	h.	PROPN
fuelectenerg-7534	590	8	y.	y.	PROPN
fuelectenerg-7534	590	9	yu	yu	PROPN
fuelectenerg-7534	590	10	,	,	PUNCT
fuelectenerg-7534	590	11	c.	c.	PROPN
fuelectenerg-7534	590	12	lee	lee	PROPN
fuelectenerg-7534	590	13	,	,	PUNCT
fuelectenerg-7534	590	14	and	and	CCONJ
fuelectenerg-7534	590	15	i.	i.	PROPN
fuelectenerg-7534	590	16	j.	j.	PROPN
fuelectenerg-7534	590	17	cho	cho	PROPN
fuelectenerg-7534	590	18	,	,	PUNCT
fuelectenerg-7534	590	19	“	"	PUNCT
fuelectenerg-7534	590	20	a	a	DET
fuelectenerg-7534	590	21	hybrid	hybrid	ADJ
fuelectenerg-7534	590	22	rf	rf	NOUN
fuelectenerg-7534	590	23	mems	mem	NOUN
fuelectenerg-7534	590	24	switch	switch	NOUN
fuelectenerg-7534	590	25	actuated	actuate	VERB
fuelectenerg-7534	590	26	by	by	ADP
fuelectenerg-7534	590	27	the	the	DET
fuelectenerg-7534	590	28	combination	combination	NOUN
fuelectenerg-7534	590	29	of	of	ADP
fuelectenerg-7534	590	30	bidirectional	bidirectional	ADJ
fuelectenerg-7534	590	31	thermal	thermal	ADJ
fuelectenerg-7534	590	32	actuations	actuation	NOUN
fuelectenerg-7534	590	33	and	and	CCONJ
fuelectenerg-7534	590	34	electrostatic	electrostatic	ADJ
fuelectenerg-7534	590	35	holding	holding	NOUN
fuelectenerg-7534	590	36	”	"	PUNCT
fuelectenerg-7534	590	37	,	,	PUNCT
fuelectenerg-7534	590	38	ieee	ieee	NOUN
fuelectenerg-7534	590	39	transactions	transaction	NOUN
fuelectenerg-7534	590	40	on	on	ADP
fuelectenerg-7534	590	41	microwave	microwave	NOUN
fuelectenerg-7534	590	42	theory	theory	NOUN
fuelectenerg-7534	590	43	and	and	CCONJ
fuelectenerg-7534	590	44	techniques	technique	NOUN
fuelectenerg-7534	590	45	,	,	PUNCT
fuelectenerg-7534	590	46	vol	vol	NOUN
fuelectenerg-7534	590	47	.	.	PROPN
fuelectenerg-7534	591	1	68	68	NUM
fuelectenerg-7534	591	2	,	,	PUNCT
fuelectenerg-7534	591	3	no	no	INTJ
fuelectenerg-7534	591	4	.	.	NOUN
fuelectenerg-7534	591	5	8	8	NUM
fuelectenerg-7534	591	6	,	,	PUNCT
fuelectenerg-7534	591	7	pp	pp	ADJ
fuelectenerg-7534	591	8	.	.	PUNCT
fuelectenerg-7534	592	1	3461–3470	3461–3470	NUM
fuelectenerg-7534	592	2	,	,	PUNCT
fuelectenerg-7534	592	3	2020	2020	NUM
fuelectenerg-7534	592	4	.	.	PUNCT
fuelectenerg-7534	593	1	https://www.components.omron.com/	https://www.components.omron.com/	NOUN
fuelectenerg-7534	593	2	https://www.components.omron.com/	https://www.components.omron.com/	PROPN
fuelectenerg-7534	593	3	https://www.businesswire.com/news/home/20190221005400/en/global-radio-frequency-rf-mems-market-2019-2023/	https://www.businesswire.com/news/home/20190221005400/en/global-radio-frequency-rf-mems-market-2019-2023/	PROPN
fuelectenerg-7534	593	4	https://www.businesswire.com/news/home/20190221005400/en/global-radio-frequency-rf-mems-market-2019-2023/	https://www.businesswire.com/news/home/20190221005400/en/global-radio-frequency-rf-mems-market-2019-2023/	PROPN
fuelectenerg-7534	593	5	https://www.cavendish-kinetics.com/release/cavendish-powers-nubia-z9-worlds-first-smartphone-with-dual-antenna-tuning/	https://www.cavendish-kinetics.com/release/cavendish-powers-nubia-z9-worlds-first-smartphone-with-dual-antenna-tuning/	PROPN
fuelectenerg-7534	593	6	https://www.cavendish-kinetics.com/release/cavendish-powers-nubia-z9-worlds-first-smartphone-with-dual-antenna-tuning/	https://www.cavendish-kinetics.com/release/cavendish-powers-nubia-z9-worlds-first-smartphone-with-dual-antenna-tuning/	VERB
fuelectenerg-7534	593	7	https://www.gsma.com/spectrum/wp-content/uploads/2020/03/5g-spectrum-positions.pdf	https://www.gsma.com/spectrum/wp-content/uploads/2020/03/5g-spectrum-positions.pdf	PROPN
fuelectenerg-7534	593	8	362	362	NUM
fuelectenerg-7534	593	9	g.	g.	PROPN
fuelectenerg-7534	593	10	tagliapietra	tagliapietra	PROPN
fuelectenerg-7534	593	11	,	,	PUNCT
fuelectenerg-7534	593	12	j.	j.	PROPN
fuelectenerg-7534	593	13	iannacci	iannacci	PROPN
fuelectenerg-7534	594	1	[	[	X
fuelectenerg-7534	594	2	24	24	NUM
fuelectenerg-7534	594	3	]	]	X
fuelectenerg-7534	594	4	a.	a.	NOUN
fuelectenerg-7534	594	5	bojesomo	bojesomo	PROPN
fuelectenerg-7534	594	6	,	,	PUNCT
fuelectenerg-7534	594	7	n.	n.	PROPN
fuelectenerg-7534	594	8	saeed	saeed	PROPN
fuelectenerg-7534	594	9	,	,	PUNCT
fuelectenerg-7534	594	10	and	and	CCONJ
fuelectenerg-7534	594	11	i.	i.	PROPN
fuelectenerg-7534	594	12	m.	m.	PROPN
fuelectenerg-7534	594	13	elfadel	elfadel	PROPN
fuelectenerg-7534	594	14	,	,	PUNCT
fuelectenerg-7534	594	15	“	"	PUNCT
fuelectenerg-7534	594	16	a	a	DET
fuelectenerg-7534	594	17	multiband	multiband	NOUN
fuelectenerg-7534	594	18	rf	rf	NOUN
fuelectenerg-7534	594	19	mems	mems	PROPN
fuelectenerg-7534	594	20	switch	switch	VERB
fuelectenerg-7534	594	21	with	with	ADP
fuelectenerg-7534	594	22	low	low	ADJ
fuelectenerg-7534	594	23	insertion	insertion	NOUN
fuelectenerg-7534	594	24	loss	loss	NOUN
fuelectenerg-7534	594	25	and	and	CCONJ
fuelectenerg-7534	594	26	cmos	cmos	NOUN
fuelectenerg-7534	594	27	-	-	PUNCT
fuelectenerg-7534	594	28	compatible	compatible	ADJ
fuelectenerg-7534	594	29	pull	pull	NOUN
fuelectenerg-7534	594	30	-	-	PUNCT
fuelectenerg-7534	594	31	in	in	ADP
fuelectenerg-7534	594	32	voltage	voltage	NOUN
fuelectenerg-7534	594	33	”	"	PUNCT
fuelectenerg-7534	594	34	in	in	ADP
fuelectenerg-7534	594	35	proceedings	proceeding	NOUN
fuelectenerg-7534	594	36	of	of	ADP
fuelectenerg-7534	594	37	the	the	DET
fuelectenerg-7534	594	38	2018	2018	NUM
fuelectenerg-7534	594	39	symposium	symposium	NOUN
fuelectenerg-7534	594	40	on	on	ADP
fuelectenerg-7534	594	41	design	design	NOUN
fuelectenerg-7534	594	42	,	,	PUNCT
fuelectenerg-7534	594	43	test	test	NOUN
fuelectenerg-7534	594	44	,	,	PUNCT
fuelectenerg-7534	594	45	integration	integration	NOUN
fuelectenerg-7534	594	46	packaging	packaging	NOUN
fuelectenerg-7534	594	47	of	of	ADP
fuelectenerg-7534	594	48	mems	mem	NOUN
fuelectenerg-7534	594	49	and	and	CCONJ
fuelectenerg-7534	594	50	moems	moem	NOUN
fuelectenerg-7534	594	51	(	(	PUNCT
fuelectenerg-7534	594	52	dtip	dtip	NOUN
fuelectenerg-7534	594	53	)	)	PUNCT
fuelectenerg-7534	594	54	,	,	PUNCT
fuelectenerg-7534	594	55	2018	2018	NUM
fuelectenerg-7534	594	56	,	,	PUNCT
fuelectenerg-7534	594	57	pp	pp	ADV
fuelectenerg-7534	594	58	.	.	PUNCT
fuelectenerg-7534	595	1	1–4	1–4	NUM
fuelectenerg-7534	595	2	.	.	PUNCT
fuelectenerg-7534	596	1	[	[	X
fuelectenerg-7534	596	2	25	25	NUM
fuelectenerg-7534	596	3	]	]	X
fuelectenerg-7534	596	4	w.	w.	PROPN
fuelectenerg-7534	596	5	tian	tian	PROPN
fuelectenerg-7534	596	6	,	,	PUNCT
fuelectenerg-7534	596	7	p.	p.	PROPN
fuelectenerg-7534	596	8	li	li	PROPN
fuelectenerg-7534	596	9	,	,	PUNCT
fuelectenerg-7534	596	10	and	and	CCONJ
fuelectenerg-7534	596	11	l.x	l.x	PROPN
fuelectenerg-7534	596	12	.	.	PROPN
fuelectenerg-7534	596	13	yuan	yuan	NOUN
fuelectenerg-7534	596	14	,	,	PUNCT
fuelectenerg-7534	596	15	“	"	PUNCT
fuelectenerg-7534	596	16	research	research	NOUN
fuelectenerg-7534	596	17	and	and	CCONJ
fuelectenerg-7534	596	18	analysis	analysis	NOUN
fuelectenerg-7534	596	19	of	of	ADP
fuelectenerg-7534	596	20	mems	mems	ADJ
fuelectenerg-7534	596	21	switches	switch	NOUN
fuelectenerg-7534	596	22	in	in	ADP
fuelectenerg-7534	596	23	different	different	ADJ
fuelectenerg-7534	596	24	frequency	frequency	NOUN
fuelectenerg-7534	596	25	bands	band	NOUN
fuelectenerg-7534	596	26	”	"	PUNCT
fuelectenerg-7534	596	27	,	,	PUNCT
fuelectenerg-7534	596	28	micromachines	micromachine	NOUN
fuelectenerg-7534	596	29	,	,	PUNCT
fuelectenerg-7534	596	30	vol	vol	NOUN
fuelectenerg-7534	596	31	.	.	PROPN
fuelectenerg-7534	596	32	9	9	NUM
fuelectenerg-7534	596	33	,	,	PUNCT
fuelectenerg-7534	596	34	no	no	INTJ
fuelectenerg-7534	596	35	.	.	NOUN
fuelectenerg-7534	596	36	04	04	NUM
fuelectenerg-7534	596	37	,	,	PUNCT
fuelectenerg-7534	596	38	2018	2018	NUM
fuelectenerg-7534	596	39	.	.	PUNCT
fuelectenerg-7534	597	1	[	[	X
fuelectenerg-7534	597	2	26	26	NUM
fuelectenerg-7534	597	3	]	]	PUNCT
fuelectenerg-7534	597	4	a.	a.	NOUN
fuelectenerg-7534	597	5	algamili	algamili	PROPN
fuelectenerg-7534	597	6	,	,	PUNCT
fuelectenerg-7534	597	7	m.	m.	NOUN
fuelectenerg-7534	597	8	haris	haris	PROPN
fuelectenerg-7534	597	9	,	,	PUNCT
fuelectenerg-7534	597	10	md	md	PROPN
fuelectenerg-7534	597	11	khir	khir	PROPN
fuelectenerg-7534	597	12	,	,	PUNCT
fuelectenerg-7534	597	13	j.	j.	PROPN
fuelectenerg-7534	597	14	dennis	dennis	PROPN
fuelectenerg-7534	597	15	,	,	PUNCT
fuelectenerg-7534	597	16	a.	a.	PROPN
fuelectenerg-7534	597	17	ahmed	ahmed	PROPN
fuelectenerg-7534	597	18	,	,	PUNCT
fuelectenerg-7534	597	19	s.	s.	PROPN
fuelectenerg-7534	597	20	omar	omar	PROPN
fuelectenerg-7534	597	21	,	,	PUNCT
fuelectenerg-7534	597	22	s.	s.	PROPN
fuelectenerg-7534	597	23	ba	ba	PROPN
fuelectenerg-7534	597	24	hashwan	hashwan	PROPN
fuelectenerg-7534	597	25	,	,	PUNCT
fuelectenerg-7534	597	26	and	and	CCONJ
fuelectenerg-7534	597	27	m.	m.	NOUN
fuelectenerg-7534	597	28	junaid	junaid	PROPN
fuelectenerg-7534	597	29	,	,	PUNCT
fuelectenerg-7534	597	30	“	"	PUNCT
fuelectenerg-7534	597	31	a	a	DET
fuelectenerg-7534	597	32	review	review	NOUN
fuelectenerg-7534	597	33	of	of	ADP
fuelectenerg-7534	597	34	actuation	actuation	NOUN
fuelectenerg-7534	597	35	and	and	CCONJ
fuelectenerg-7534	597	36	sensing	sense	VERB
fuelectenerg-7534	597	37	mechanisms	mechanism	NOUN
fuelectenerg-7534	597	38	in	in	ADP
fuelectenerg-7534	597	39	mems	mem	NOUN
fuelectenerg-7534	597	40	-	-	PUNCT
fuelectenerg-7534	597	41	based	base	VERB
fuelectenerg-7534	597	42	sensor	sensor	NOUN
fuelectenerg-7534	597	43	devices	device	NOUN
fuelectenerg-7534	597	44	”	"	PUNCT
fuelectenerg-7534	597	45	,	,	PUNCT
fuelectenerg-7534	597	46	nanoscale	nanoscale	NOUN
fuelectenerg-7534	597	47	research	research	NOUN
fuelectenerg-7534	597	48	letters	letter	NOUN
fuelectenerg-7534	597	49	,	,	PUNCT
fuelectenerg-7534	597	50	01	01	NUM
fuelectenerg-7534	597	51	2021	2021	NUM
fuelectenerg-7534	597	52	.	.	PUNCT
fuelectenerg-7534	598	1	[	[	X
fuelectenerg-7534	598	2	27	27	NUM
fuelectenerg-7534	598	3	]	]	X
fuelectenerg-7534	598	4	d.	d.	PROPN
fuelectenerg-7534	598	5	a.	a.	PROPN
fuelectenerg-7534	598	6	czaplewski	czaplewski	PROPN
fuelectenerg-7534	598	7	,	,	PUNCT
fuelectenerg-7534	598	8	c.	c.	PROPN
fuelectenerg-7534	598	9	w.	w.	PROPN
fuelectenerg-7534	598	10	dyck	dyck	PROPN
fuelectenerg-7534	598	11	,	,	PUNCT
fuelectenerg-7534	598	12	h.	h.	PROPN
fuelectenerg-7534	598	13	sumali	sumali	PROPN
fuelectenerg-7534	598	14	,	,	PUNCT
fuelectenerg-7534	598	15	j.	j.	PROPN
fuelectenerg-7534	598	16	e.	e.	PROPN
fuelectenerg-7534	598	17	massad	massad	PROPN
fuelectenerg-7534	598	18	,	,	PUNCT
fuelectenerg-7534	598	19	j.	j.	PROPN
fuelectenerg-7534	598	20	d.	d.	PROPN
fuelectenerg-7534	598	21	kuppers	kuppers	PROPN
fuelectenerg-7534	598	22	,	,	PUNCT
fuelectenerg-7534	598	23	i.	i.	PROPN
fuelectenerg-7534	598	24	reines	reines	PROPN
fuelectenerg-7534	598	25	,	,	PUNCT
fuelectenerg-7534	598	26	w.	w.	PROPN
fuelectenerg-7534	598	27	d.	d.	PROPN
fuelectenerg-7534	598	28	cowan	cowan	PROPN
fuelectenerg-7534	598	29	,	,	PUNCT
fuelectenerg-7534	598	30	and	and	CCONJ
fuelectenerg-7534	598	31	c.	c.	PROPN
fuelectenerg-7534	598	32	p.	p.	NOUN
fuelectenerg-7534	598	33	tigges	tigge	NOUN
fuelectenerg-7534	598	34	,	,	PUNCT
fuelectenerg-7534	598	35	“	"	PUNCT
fuelectenerg-7534	598	36	a	a	DET
fuelectenerg-7534	598	37	soft	soft	ADJ
fuelectenerg-7534	598	38	-	-	PUNCT
fuelectenerg-7534	598	39	landing	landing	NOUN
fuelectenerg-7534	598	40	waveform	waveform	NOUN
fuelectenerg-7534	598	41	for	for	ADP
fuelectenerg-7534	598	42	actuation	actuation	NOUN
fuelectenerg-7534	598	43	of	of	ADP
fuelectenerg-7534	598	44	a	a	DET
fuelectenerg-7534	598	45	single	single	ADJ
fuelectenerg-7534	598	46	-	-	PUNCT
fuelectenerg-7534	598	47	pole	pole	NOUN
fuelectenerg-7534	598	48	single	single	ADJ
fuelectenerg-7534	598	49	-	-	PUNCT
fuelectenerg-7534	598	50	throw	throw	NOUN
fuelectenerg-7534	598	51	ohmic	ohmic	ADJ
fuelectenerg-7534	598	52	rf	rf	ADJ
fuelectenerg-7534	598	53	mems	mem	NOUN
fuelectenerg-7534	598	54	switch	switch	NOUN
fuelectenerg-7534	598	55	”	"	PUNCT
fuelectenerg-7534	598	56	,	,	PUNCT
fuelectenerg-7534	598	57	journal	journal	NOUN
fuelectenerg-7534	598	58	of	of	ADP
fuelectenerg-7534	598	59	microelectromechanical	microelectromechanical	ADJ
fuelectenerg-7534	598	60	systems	system	NOUN
fuelectenerg-7534	598	61	,	,	PUNCT
fuelectenerg-7534	598	62	vol	vol	NOUN
fuelectenerg-7534	598	63	.	.	PROPN
fuelectenerg-7534	598	64	15	15	NUM
fuelectenerg-7534	598	65	,	,	PUNCT
fuelectenerg-7534	598	66	no	no	INTJ
fuelectenerg-7534	598	67	.	.	NOUN
fuelectenerg-7534	598	68	6	6	NUM
fuelectenerg-7534	598	69	,	,	PUNCT
fuelectenerg-7534	598	70	pp	pp	ADJ
fuelectenerg-7534	598	71	.	.	PUNCT
fuelectenerg-7534	599	1	1586–1594	1586–1594	NUM
fuelectenerg-7534	599	2	,	,	PUNCT
fuelectenerg-7534	599	3	2006	2006	NUM
fuelectenerg-7534	599	4	.	.	PUNCT
fuelectenerg-7534	600	1	[	[	X
fuelectenerg-7534	600	2	28	28	NUM
fuelectenerg-7534	600	3	]	]	X
fuelectenerg-7534	600	4	d.	d.	PROPN
fuelectenerg-7534	600	5	peroulis	peroulis	PROPN
fuelectenerg-7534	600	6	,	,	PUNCT
fuelectenerg-7534	600	7	s.	s.	PROPN
fuelectenerg-7534	600	8	p.	p.	PROPN
fuelectenerg-7534	600	9	pacheco	pacheco	PROPN
fuelectenerg-7534	600	10	,	,	PUNCT
fuelectenerg-7534	600	11	k.	k.	PROPN
fuelectenerg-7534	600	12	sarabandi	sarabandi	PROPN
fuelectenerg-7534	600	13	,	,	PUNCT
fuelectenerg-7534	600	14	and	and	CCONJ
fuelectenerg-7534	601	1	l.	l.	PROPN
fuelectenerg-7534	601	2	p.	p.	PROPN
fuelectenerg-7534	601	3	b.	b.	PROPN
fuelectenerg-7534	601	4	katehi	katehi	PROPN
fuelectenerg-7534	601	5	,	,	PUNCT
fuelectenerg-7534	601	6	“	"	PUNCT
fuelectenerg-7534	601	7	electromechanical	electromechanical	ADJ
fuelectenerg-7534	601	8	considerations	consideration	NOUN
fuelectenerg-7534	601	9	in	in	ADP
fuelectenerg-7534	601	10	developing	develop	VERB
fuelectenerg-7534	601	11	low	low	ADJ
fuelectenerg-7534	601	12	-	-	PUNCT
fuelectenerg-7534	601	13	voltage	voltage	NOUN
fuelectenerg-7534	601	14	rf	rf	NOUN
fuelectenerg-7534	601	15	mems	mem	NOUN
fuelectenerg-7534	601	16	switches	switch	NOUN
fuelectenerg-7534	601	17	”	"	PUNCT
fuelectenerg-7534	601	18	,	,	PUNCT
fuelectenerg-7534	601	19	ieee	ieee	NOUN
fuelectenerg-7534	601	20	transactions	transaction	NOUN
fuelectenerg-7534	601	21	on	on	ADP
fuelectenerg-7534	601	22	microwave	microwave	NOUN
fuelectenerg-7534	601	23	theory	theory	NOUN
fuelectenerg-7534	601	24	and	and	CCONJ
fuelectenerg-7534	601	25	techniques	technique	NOUN
fuelectenerg-7534	601	26	,	,	PUNCT
fuelectenerg-7534	601	27	vol	vol	NOUN
fuelectenerg-7534	601	28	.	.	PROPN
fuelectenerg-7534	602	1	51	51	NUM
fuelectenerg-7534	602	2	,	,	PUNCT
fuelectenerg-7534	602	3	no	no	INTJ
fuelectenerg-7534	602	4	.	.	NOUN
fuelectenerg-7534	602	5	1	1	NUM
fuelectenerg-7534	602	6	,	,	PUNCT
fuelectenerg-7534	602	7	pp	pp	ADJ
fuelectenerg-7534	602	8	.	.	PUNCT
fuelectenerg-7534	603	1	259–270	259–270	NUM
fuelectenerg-7534	603	2	,	,	PUNCT
fuelectenerg-7534	603	3	2003	2003	NUM
fuelectenerg-7534	603	4	.	.	PUNCT
fuelectenerg-7534	604	1	[	[	X
fuelectenerg-7534	604	2	29	29	NUM
fuelectenerg-7534	604	3	]	]	PUNCT
fuelectenerg-7534	604	4	s.	s.	PROPN
fuelectenerg-7534	604	5	fouladi	fouladi	PROPN
fuelectenerg-7534	604	6	and	and	CCONJ
fuelectenerg-7534	604	7	r.	r.	PROPN
fuelectenerg-7534	604	8	r.	r.	PROPN
fuelectenerg-7534	604	9	mansour	mansour	PROPN
fuelectenerg-7534	604	10	,	,	PUNCT
fuelectenerg-7534	604	11	“	"	PUNCT
fuelectenerg-7534	604	12	capacitive	capacitive	ADJ
fuelectenerg-7534	604	13	rf	rf	NOUN
fuelectenerg-7534	604	14	mems	mem	NOUN
fuelectenerg-7534	604	15	switches	switch	NOUN
fuelectenerg-7534	604	16	fabricated	fabricate	VERB
fuelectenerg-7534	604	17	in	in	ADP
fuelectenerg-7534	604	18	standard	standard	ADJ
fuelectenerg-7534	604	19	0.35	0.35	NUM
fuelectenerg-7534	604	20	-	-	PUNCT
fuelectenerg-7534	604	21	um	um	INTJ
fuelectenerg-7534	604	22	cmos	cmos	PROPN
fuelectenerg-7534	604	23	technology	technology	NOUN
fuelectenerg-7534	604	24	”	"	PUNCT
fuelectenerg-7534	604	25	,	,	PUNCT
fuelectenerg-7534	604	26	ieee	ieee	NOUN
fuelectenerg-7534	604	27	transactions	transaction	NOUN
fuelectenerg-7534	604	28	on	on	ADP
fuelectenerg-7534	604	29	microwave	microwave	NOUN
fuelectenerg-7534	604	30	theory	theory	NOUN
fuelectenerg-7534	604	31	and	and	CCONJ
fuelectenerg-7534	604	32	techniques	technique	NOUN
fuelectenerg-7534	604	33	,	,	PUNCT
fuelectenerg-7534	604	34	vol	vol	NOUN
fuelectenerg-7534	604	35	.	.	PROPN
fuelectenerg-7534	605	1	58	58	NUM
fuelectenerg-7534	605	2	,	,	PUNCT
fuelectenerg-7534	605	3	no	no	INTJ
fuelectenerg-7534	605	4	.	.	NOUN
fuelectenerg-7534	605	5	2	2	NUM
fuelectenerg-7534	605	6	,	,	PUNCT
fuelectenerg-7534	605	7	pp	pp	ADJ
fuelectenerg-7534	605	8	.	.	PUNCT
fuelectenerg-7534	606	1	478–486	478–486	NUM
fuelectenerg-7534	606	2	,	,	PUNCT
fuelectenerg-7534	606	3	2010	2010	NUM
fuelectenerg-7534	606	4	.	.	PUNCT
fuelectenerg-7534	607	1	[	[	X
fuelectenerg-7534	607	2	30	30	NUM
fuelectenerg-7534	607	3	]	]	PUNCT
fuelectenerg-7534	607	4	a.	a.	NOUN
fuelectenerg-7534	607	5	gopalan	gopalan	NOUN
fuelectenerg-7534	607	6	and	and	CCONJ
fuelectenerg-7534	607	7	u.	u.	PROPN
fuelectenerg-7534	607	8	k.	k.	PROPN
fuelectenerg-7534	607	9	kommuri	kommuri	PROPN
fuelectenerg-7534	607	10	,	,	PUNCT
fuelectenerg-7534	607	11	“	"	PUNCT
fuelectenerg-7534	607	12	design	design	NOUN
fuelectenerg-7534	607	13	and	and	CCONJ
fuelectenerg-7534	607	14	development	development	NOUN
fuelectenerg-7534	607	15	of	of	ADP
fuelectenerg-7534	607	16	miniaturized	miniaturize	VERB
fuelectenerg-7534	607	17	low	low	ADJ
fuelectenerg-7534	607	18	voltage	voltage	NOUN
fuelectenerg-7534	607	19	triangular	triangular	NOUN
fuelectenerg-7534	607	20	rf	rf	NOUN
fuelectenerg-7534	607	21	mems	mem	NOUN
fuelectenerg-7534	607	22	switch	switch	VERB
fuelectenerg-7534	607	23	for	for	ADP
fuelectenerg-7534	607	24	phased	phased	ADJ
fuelectenerg-7534	607	25	array	array	NOUN
fuelectenerg-7534	607	26	application	application	NOUN
fuelectenerg-7534	607	27	”	"	PUNCT
fuelectenerg-7534	607	28	,	,	PUNCT
fuelectenerg-7534	607	29	applied	apply	VERB
fuelectenerg-7534	607	30	surface	surface	NOUN
fuelectenerg-7534	607	31	science	science	NOUN
fuelectenerg-7534	607	32	,	,	PUNCT
fuelectenerg-7534	607	33	vol	vol	NOUN
fuelectenerg-7534	607	34	.	.	PROPN
fuelectenerg-7534	608	1	449	449	NUM
fuelectenerg-7534	608	2	,	,	PUNCT
fuelectenerg-7534	608	3	pp	pp	ADJ
fuelectenerg-7534	608	4	.	.	PUNCT
fuelectenerg-7534	609	1	340–345	340–345	NUM
fuelectenerg-7534	609	2	,	,	PUNCT
fuelectenerg-7534	609	3	2018	2018	NUM
fuelectenerg-7534	609	4	.	.	PUNCT
fuelectenerg-7534	610	1	4th	4th	ADJ
fuelectenerg-7534	610	2	international	international	ADJ
fuelectenerg-7534	610	3	conference	conference	NOUN
fuelectenerg-7534	610	4	on	on	ADP
fuelectenerg-7534	610	5	nanoscience	nanoscience	NOUN
fuelectenerg-7534	610	6	and	and	CCONJ
fuelectenerg-7534	610	7	nanotechnology	nanotechnology	NOUN
fuelectenerg-7534	610	8	.	.	PUNCT
fuelectenerg-7534	611	1	[	[	X
fuelectenerg-7534	611	2	31	31	NUM
fuelectenerg-7534	611	3	]	]	PUNCT
fuelectenerg-7534	611	4	h.	h.	PROPN
fuelectenerg-7534	611	5	wei	wei	PROPN
fuelectenerg-7534	611	6	,	,	PUNCT
fuelectenerg-7534	611	7	z.	z.	PROPN
fuelectenerg-7534	611	8	deng	deng	PROPN
fuelectenerg-7534	611	9	,	,	PUNCT
fuelectenerg-7534	611	10	x.	x.	PROPN
fuelectenerg-7534	611	11	guo	guo	PROPN
fuelectenerg-7534	611	12	,	,	PUNCT
fuelectenerg-7534	611	13	y.	y.	PROPN
fuelectenerg-7534	611	14	wang	wang	PROPN
fuelectenerg-7534	611	15	,	,	PUNCT
fuelectenerg-7534	611	16	and	and	CCONJ
fuelectenerg-7534	611	17	h.	h.	PROPN
fuelectenerg-7534	611	18	yang	yang	PROPN
fuelectenerg-7534	611	19	,	,	PUNCT
fuelectenerg-7534	611	20	“	"	PUNCT
fuelectenerg-7534	611	21	high	high	ADJ
fuelectenerg-7534	611	22	on	on	ADP
fuelectenerg-7534	611	23	/	/	SYM
fuelectenerg-7534	611	24	off	off	ADP
fuelectenerg-7534	611	25	capacitance	capacitance	NOUN
fuelectenerg-7534	611	26	ratio	ratio	NOUN
fuelectenerg-7534	611	27	rf	rf	NOUN
fuelectenerg-7534	611	28	mems	mems	PROPN
fuelectenerg-7534	611	29	capacitive	capacitive	ADJ
fuelectenerg-7534	611	30	switches	switch	NOUN
fuelectenerg-7534	611	31	”	"	PUNCT
fuelectenerg-7534	611	32	,	,	PUNCT
fuelectenerg-7534	611	33	journal	journal	NOUN
fuelectenerg-7534	611	34	of	of	ADP
fuelectenerg-7534	611	35	micromechanics	micromechanic	NOUN
fuelectenerg-7534	611	36	and	and	CCONJ
fuelectenerg-7534	611	37	microengineering	microengineering	NOUN
fuelectenerg-7534	611	38	,	,	PUNCT
fuelectenerg-7534	611	39	vol	vol	NOUN
fuelectenerg-7534	611	40	.	.	PROPN
fuelectenerg-7534	611	41	7	7	NUM
fuelectenerg-7534	611	42	,	,	PUNCT
fuelectenerg-7534	611	43	no	no	INTJ
fuelectenerg-7534	611	44	.	.	NOUN
fuelectenerg-7534	611	45	5	5	NUM
fuelectenerg-7534	611	46	,	,	PUNCT
fuelectenerg-7534	611	47	p.	p.	NOUN
fuelectenerg-7534	611	48	055002	055002	NUM
fuelectenerg-7534	611	49	,	,	PUNCT
fuelectenerg-7534	611	50	mar	mar	PROPN
fuelectenerg-7534	611	51	2017	2017	NUM
fuelectenerg-7534	611	52	.	.	PUNCT
fuelectenerg-7534	612	1	[	[	X
fuelectenerg-7534	612	2	32	32	NUM
fuelectenerg-7534	612	3	]	]	PUNCT
fuelectenerg-7534	612	4	j.	j.	PROPN
fuelectenerg-7534	612	5	iannacci	iannacci	PROPN
fuelectenerg-7534	612	6	,	,	PUNCT
fuelectenerg-7534	612	7	a.	a.	NOUN
fuelectenerg-7534	612	8	repchankova	repchankova	PROPN
fuelectenerg-7534	612	9	,	,	PUNCT
fuelectenerg-7534	612	10	d.	d.	PROPN
fuelectenerg-7534	612	11	macii	macii	PROPN
fuelectenerg-7534	612	12	,	,	PUNCT
fuelectenerg-7534	612	13	and	and	CCONJ
fuelectenerg-7534	612	14	m.	m.	NOUN
fuelectenerg-7534	612	15	niessner	niessner	NOUN
fuelectenerg-7534	612	16	,	,	PUNCT
fuelectenerg-7534	612	17	“	"	PUNCT
fuelectenerg-7534	612	18	a	a	DET
fuelectenerg-7534	612	19	measurement	measurement	NOUN
fuelectenerg-7534	612	20	procedure	procedure	NOUN
fuelectenerg-7534	612	21	of	of	ADP
fuelectenerg-7534	612	22	technologyrelated	technologyrelate	VERB
fuelectenerg-7534	612	23	model	model	NOUN
fuelectenerg-7534	612	24	parameters	parameter	NOUN
fuelectenerg-7534	612	25	for	for	ADP
fuelectenerg-7534	612	26	enhanced	enhanced	ADJ
fuelectenerg-7534	612	27	rf	rf	ADJ
fuelectenerg-7534	612	28	-	-	PUNCT
fuelectenerg-7534	612	29	mems	mems	ADJ
fuelectenerg-7534	612	30	design	design	NOUN
fuelectenerg-7534	612	31	”	"	PUNCT
fuelectenerg-7534	612	32	,	,	PUNCT
fuelectenerg-7534	612	33	in	in	ADP
fuelectenerg-7534	612	34	proceedings	proceeding	NOUN
fuelectenerg-7534	612	35	of	of	ADP
fuelectenerg-7534	612	36	the	the	DET
fuelectenerg-7534	612	37	2009	2009	NUM
fuelectenerg-7534	612	38	ieee	ieee	NOUN
fuelectenerg-7534	612	39	international	international	ADJ
fuelectenerg-7534	612	40	workshop	workshop	NOUN
fuelectenerg-7534	612	41	on	on	ADP
fuelectenerg-7534	612	42	advanced	advanced	ADJ
fuelectenerg-7534	612	43	methods	method	NOUN
fuelectenerg-7534	612	44	for	for	ADP
fuelectenerg-7534	612	45	uncertainty	uncertainty	NOUN
fuelectenerg-7534	612	46	estimation	estimation	NOUN
fuelectenerg-7534	612	47	in	in	ADP
fuelectenerg-7534	612	48	measurement	measurement	NOUN
fuelectenerg-7534	612	49	,	,	PUNCT
fuelectenerg-7534	612	50	pp	pp	PROPN
fuelectenerg-7534	612	51	.	.	PUNCT
fuelectenerg-7534	613	1	44–49	44–49	NUM
fuelectenerg-7534	613	2	,	,	PUNCT
fuelectenerg-7534	613	3	2009	2009	NUM
fuelectenerg-7534	613	4	.	.	PUNCT
fuelectenerg-7534	614	1	[	[	X
fuelectenerg-7534	614	2	33	33	NUM
fuelectenerg-7534	614	3	]	]	PUNCT
fuelectenerg-7534	614	4	j.	j.	PROPN
fuelectenerg-7534	614	5	iannacci	iannacci	PROPN
fuelectenerg-7534	614	6	,	,	PUNCT
fuelectenerg-7534	614	7	“	"	PUNCT
fuelectenerg-7534	614	8	mixed	mixed	ADJ
fuelectenerg-7534	614	9	-	-	PUNCT
fuelectenerg-7534	614	10	domain	domain	NOUN
fuelectenerg-7534	614	11	fast	fast	ADJ
fuelectenerg-7534	614	12	simulation	simulation	NOUN
fuelectenerg-7534	614	13	of	of	ADP
fuelectenerg-7534	614	14	rf	rf	NOUN
fuelectenerg-7534	614	15	and	and	CCONJ
fuelectenerg-7534	614	16	microwave	microwave	NOUN
fuelectenerg-7534	614	17	mems	mem	NOUN
fuelectenerg-7534	614	18	-	-	PUNCT
fuelectenerg-7534	614	19	based	base	VERB
fuelectenerg-7534	614	20	complex	complex	ADJ
fuelectenerg-7534	614	21	networks	network	NOUN
fuelectenerg-7534	614	22	within	within	ADP
fuelectenerg-7534	614	23	standard	standard	PROPN
fuelectenerg-7534	614	24	ic	ic	PROPN
fuelectenerg-7534	614	25	development	development	NOUN
fuelectenerg-7534	614	26	frameworks	framework	NOUN
fuelectenerg-7534	614	27	”	"	PUNCT
fuelectenerg-7534	614	28	,	,	PUNCT
fuelectenerg-7534	614	29	04	04	NUM
fuelectenerg-7534	614	30	,	,	PUNCT
fuelectenerg-7534	614	31	2010	2010	NUM
fuelectenerg-7534	614	32	.	.	PUNCT
fuelectenerg-7534	615	1	[	[	X
fuelectenerg-7534	615	2	34	34	NUM
fuelectenerg-7534	615	3	]	]	SYM
fuelectenerg-7534	615	4	j.-m	j.-m	NOUN
fuelectenerg-7534	615	5	.	.	PUNCT
fuelectenerg-7534	616	1	kim	kim	PROPN
fuelectenerg-7534	616	2	,	,	PUNCT
fuelectenerg-7534	616	3	j.-h	j.-h	PROPN
fuelectenerg-7534	616	4	.	.	PUNCT
fuelectenerg-7534	617	1	park	park	NOUN
fuelectenerg-7534	617	2	,	,	PUNCT
fuelectenerg-7534	617	3	c.-w	c.-w	PROPN
fuelectenerg-7534	617	4	.	.	PUNCT
fuelectenerg-7534	618	1	baek	baek	PROPN
fuelectenerg-7534	618	2	,	,	PUNCT
fuelectenerg-7534	618	3	and	and	CCONJ
fuelectenerg-7534	618	4	y.-k	y.-k	PROPN
fuelectenerg-7534	618	5	.	.	PUNCT
fuelectenerg-7534	619	1	kim	kim	PROPN
fuelectenerg-7534	619	2	,	,	PUNCT
fuelectenerg-7534	619	3	“	"	PUNCT
fuelectenerg-7534	619	4	the	the	DET
fuelectenerg-7534	619	5	siog	siog	NOUN
fuelectenerg-7534	619	6	-	-	PUNCT
fuelectenerg-7534	619	7	based	base	VERB
fuelectenerg-7534	619	8	single	single	ADJ
fuelectenerg-7534	619	9	-	-	PUNCT
fuelectenerg-7534	619	10	crystalline	crystalline	NOUN
fuelectenerg-7534	619	11	silicon	silicon	NOUN
fuelectenerg-7534	619	12	(	(	PUNCT
fuelectenerg-7534	619	13	scs	scs	PROPN
fuelectenerg-7534	619	14	)	)	PUNCT
fuelectenerg-7534	619	15	rf	rf	NOUN
fuelectenerg-7534	619	16	mems	mems	PROPN
fuelectenerg-7534	619	17	switch	switch	VERB
fuelectenerg-7534	619	18	with	with	ADP
fuelectenerg-7534	619	19	uniform	uniform	ADJ
fuelectenerg-7534	619	20	characteristics	characteristic	NOUN
fuelectenerg-7534	619	21	”	"	PUNCT
fuelectenerg-7534	619	22	,	,	PUNCT
fuelectenerg-7534	619	23	journal	journal	NOUN
fuelectenerg-7534	619	24	of	of	ADP
fuelectenerg-7534	619	25	microelectromechanical	microelectromechanical	ADJ
fuelectenerg-7534	619	26	systems	system	NOUN
fuelectenerg-7534	619	27	,	,	PUNCT
fuelectenerg-7534	619	28	vol	vol	NOUN
fuelectenerg-7534	619	29	.	.	PROPN
fuelectenerg-7534	619	30	13	13	NUM
fuelectenerg-7534	619	31	,	,	PUNCT
fuelectenerg-7534	619	32	no	no	INTJ
fuelectenerg-7534	619	33	.	.	NOUN
fuelectenerg-7534	619	34	6	6	NUM
fuelectenerg-7534	619	35	,	,	PUNCT
fuelectenerg-7534	619	36	pp	pp	ADJ
fuelectenerg-7534	619	37	.	.	PUNCT
fuelectenerg-7534	620	1	1036–1042	1036–1042	NUM
fuelectenerg-7534	620	2	,	,	PUNCT
fuelectenerg-7534	620	3	2004	2004	NUM
fuelectenerg-7534	620	4	.	.	PUNCT
fuelectenerg-7534	621	1	[	[	X
fuelectenerg-7534	621	2	35	35	NUM
fuelectenerg-7534	621	3	]	]	PUNCT
fuelectenerg-7534	621	4	a.	a.	NOUN
fuelectenerg-7534	621	5	persano	persano	PROPN
fuelectenerg-7534	621	6	,	,	PUNCT
fuelectenerg-7534	621	7	a.	a.	NOUN
fuelectenerg-7534	621	8	tazzoli	tazzoli	PROPN
fuelectenerg-7534	621	9	,	,	PUNCT
fuelectenerg-7534	621	10	p.	p.	PROPN
fuelectenerg-7534	621	11	farinelli	farinelli	PROPN
fuelectenerg-7534	621	12	,	,	PUNCT
fuelectenerg-7534	621	13	g.	g.	PROPN
fuelectenerg-7534	621	14	meneghesso	meneghesso	PROPN
fuelectenerg-7534	621	15	,	,	PUNCT
fuelectenerg-7534	621	16	p.	p.	PROPN
fuelectenerg-7534	621	17	siciliano	siciliano	PROPN
fuelectenerg-7534	621	18	,	,	PUNCT
fuelectenerg-7534	621	19	and	and	CCONJ
fuelectenerg-7534	621	20	f.	f.	PROPN
fuelectenerg-7534	621	21	quaranta	quaranta	PROPN
fuelectenerg-7534	621	22	,	,	PUNCT
fuelectenerg-7534	621	23	“	"	PUNCT
fuelectenerg-7534	621	24	k	k	ADJ
fuelectenerg-7534	621	25	-	-	ADJ
fuelectenerg-7534	621	26	band	band	NOUN
fuelectenerg-7534	621	27	capacitive	capacitive	ADJ
fuelectenerg-7534	621	28	mems	mem	NOUN
fuelectenerg-7534	621	29	switches	switch	NOUN
fuelectenerg-7534	621	30	on	on	ADP
fuelectenerg-7534	621	31	gaas	gaas	NOUN
fuelectenerg-7534	621	32	substrate	substrate	NOUN
fuelectenerg-7534	621	33	:	:	PUNCT
fuelectenerg-7534	621	34	design	design	NOUN
fuelectenerg-7534	621	35	,	,	PUNCT
fuelectenerg-7534	621	36	fabrication	fabrication	NOUN
fuelectenerg-7534	621	37	,	,	PUNCT
fuelectenerg-7534	621	38	and	and	CCONJ
fuelectenerg-7534	621	39	reliability	reliability	NOUN
fuelectenerg-7534	621	40	”	"	PUNCT
fuelectenerg-7534	621	41	,	,	PUNCT
fuelectenerg-7534	621	42	microelectronics	microelectronic	NOUN
fuelectenerg-7534	621	43	reliability	reliability	NOUN
fuelectenerg-7534	621	44	,	,	PUNCT
fuelectenerg-7534	621	45	vol	vol	NOUN
fuelectenerg-7534	621	46	.	.	PROPN
fuelectenerg-7534	621	47	52	52	NUM
fuelectenerg-7534	621	48	,	,	PUNCT
fuelectenerg-7534	621	49	no	no	INTJ
fuelectenerg-7534	621	50	.	.	NOUN
fuelectenerg-7534	621	51	9	9	NUM
fuelectenerg-7534	621	52	,	,	PUNCT
fuelectenerg-7534	621	53	pp	pp	ADJ
fuelectenerg-7534	621	54	.	.	PUNCT
fuelectenerg-7534	622	1	2245–2249	2245–2249	NUM
fuelectenerg-7534	622	2	,	,	PUNCT
fuelectenerg-7534	622	3	2012	2012	NUM
fuelectenerg-7534	622	4	.	.	PUNCT
fuelectenerg-7534	623	1	[	[	X
fuelectenerg-7534	623	2	36	36	NUM
fuelectenerg-7534	623	3	]	]	X
fuelectenerg-7534	623	4	s.	s.	PROPN
fuelectenerg-7534	623	5	touati	touati	PROPN
fuelectenerg-7534	623	6	,	,	PUNCT
fuelectenerg-7534	623	7	n.	n.	PROPN
fuelectenerg-7534	623	8	lorphelin	lorphelin	PROPN
fuelectenerg-7534	623	9	,	,	PUNCT
fuelectenerg-7534	623	10	a.	a.	PROPN
fuelectenerg-7534	623	11	kanciurzewski	kanciurzewski	PROPN
fuelectenerg-7534	623	12	,	,	PUNCT
fuelectenerg-7534	623	13	r.	r.	PROPN
fuelectenerg-7534	623	14	robin	robin	PROPN
fuelectenerg-7534	623	15	,	,	PUNCT
fuelectenerg-7534	623	16	a.	a.	NOUN
fuelectenerg-7534	623	17	rollier	rollier	NOUN
fuelectenerg-7534	623	18	,	,	PUNCT
fuelectenerg-7534	623	19	o.	o.	NOUN
fuelectenerg-7534	623	20	millet	millet	PROPN
fuelectenerg-7534	623	21	,	,	PUNCT
fuelectenerg-7534	623	22	and	and	CCONJ
fuelectenerg-7534	623	23	k.	k.	PROPN
fuelectenerg-7534	623	24	segueni	segueni	PROPN
fuelectenerg-7534	623	25	,	,	PUNCT
fuelectenerg-7534	623	26	“	"	PUNCT
fuelectenerg-7534	623	27	low	low	ADJ
fuelectenerg-7534	623	28	actuation	actuation	NOUN
fuelectenerg-7534	623	29	voltage	voltage	NOUN
fuelectenerg-7534	623	30	totally	totally	ADV
fuelectenerg-7534	623	31	free	free	ADJ
fuelectenerg-7534	623	32	flexible	flexible	ADJ
fuelectenerg-7534	623	33	rf	rf	NOUN
fuelectenerg-7534	623	34	mems	mem	NOUN
fuelectenerg-7534	623	35	switch	switch	VERB
fuelectenerg-7534	623	36	with	with	ADP
fuelectenerg-7534	623	37	antistiction	antistiction	NOUN
fuelectenerg-7534	623	38	system	system	NOUN
fuelectenerg-7534	623	39	”	"	PUNCT
fuelectenerg-7534	623	40	,	,	PUNCT
fuelectenerg-7534	623	41	in	in	ADP
fuelectenerg-7534	623	42	proceedings	proceeding	NOUN
fuelectenerg-7534	623	43	of	of	ADP
fuelectenerg-7534	623	44	the	the	DET
fuelectenerg-7534	623	45	2008	2008	NUM
fuelectenerg-7534	623	46	symposium	symposium	NOUN
fuelectenerg-7534	623	47	on	on	ADP
fuelectenerg-7534	623	48	design	design	NOUN
fuelectenerg-7534	623	49	,	,	PUNCT
fuelectenerg-7534	623	50	test	test	NOUN
fuelectenerg-7534	623	51	,	,	PUNCT
fuelectenerg-7534	623	52	integration	integration	NOUN
fuelectenerg-7534	623	53	and	and	CCONJ
fuelectenerg-7534	623	54	packaging	packaging	NOUN
fuelectenerg-7534	623	55	of	of	ADP
fuelectenerg-7534	623	56	mems	mem	NOUN
fuelectenerg-7534	623	57	/	/	SYM
fuelectenerg-7534	623	58	moems	moem	NOUN
fuelectenerg-7534	623	59	,	,	PUNCT
fuelectenerg-7534	623	60	2008	2008	NUM
fuelectenerg-7534	623	61	,	,	PUNCT
fuelectenerg-7534	623	62	pp	pp	ADJ
fuelectenerg-7534	623	63	.	.	PUNCT
fuelectenerg-7534	624	1	66–70	66–70	NOUN
fuelectenerg-7534	624	2	.	.	PUNCT
fuelectenerg-7534	625	1	[	[	X
fuelectenerg-7534	625	2	37	37	NUM
fuelectenerg-7534	625	3	]	]	PUNCT
fuelectenerg-7534	625	4	j.	j.	PROPN
fuelectenerg-7534	625	5	y.	y.	PROPN
fuelectenerg-7534	625	6	park	park	PROPN
fuelectenerg-7534	625	7	,	,	PUNCT
fuelectenerg-7534	625	8	g.	g.	PROPN
fuelectenerg-7534	625	9	h.	h.	PROPN
fuelectenerg-7534	625	10	kim	kim	PROPN
fuelectenerg-7534	625	11	,	,	PUNCT
fuelectenerg-7534	625	12	k.	k.	PROPN
fuelectenerg-7534	625	13	w.	w.	PROPN
fuelectenerg-7534	625	14	chung	chung	PROPN
fuelectenerg-7534	625	15	,	,	PUNCT
fuelectenerg-7534	625	16	and	and	CCONJ
fuelectenerg-7534	625	17	j.	j.	PROPN
fuelectenerg-7534	625	18	u.	u.	PROPN
fuelectenerg-7534	625	19	bu	bu	PROPN
fuelectenerg-7534	625	20	,	,	PUNCT
fuelectenerg-7534	625	21	“	"	PUNCT
fuelectenerg-7534	625	22	fully	fully	ADV
fuelectenerg-7534	625	23	integrated	integrate	VERB
fuelectenerg-7534	625	24	micromachined	micromachine	VERB
fuelectenerg-7534	625	25	capacitive	capacitive	ADJ
fuelectenerg-7534	625	26	switches	switch	NOUN
fuelectenerg-7534	625	27	for	for	ADP
fuelectenerg-7534	625	28	rf	rf	NOUN
fuelectenerg-7534	625	29	applications	application	NOUN
fuelectenerg-7534	625	30	”	"	PUNCT
fuelectenerg-7534	625	31	,	,	PUNCT
fuelectenerg-7534	625	32	in	in	ADP
fuelectenerg-7534	625	33	proceedings	proceeding	NOUN
fuelectenerg-7534	625	34	of	of	ADP
fuelectenerg-7534	625	35	the	the	DET
fuelectenerg-7534	625	36	2000	2000	NUM
fuelectenerg-7534	625	37	ieee	ieee	NOUN
fuelectenerg-7534	625	38	mtt	mtt	PROPN
fuelectenerg-7534	625	39	-	-	PUNCT
fuelectenerg-7534	625	40	s	s	NOUN
fuelectenerg-7534	625	41	international	international	ADJ
fuelectenerg-7534	625	42	microwave	microwave	NOUN
fuelectenerg-7534	625	43	symposium	symposium	NOUN
fuelectenerg-7534	625	44	digest	digest	NOUN
fuelectenerg-7534	625	45	(	(	PUNCT
fuelectenerg-7534	625	46	cat	cat	NOUN
fuelectenerg-7534	625	47	.	.	PUNCT
fuelectenerg-7534	626	1	no.00ch37017	no.00ch37017	PROPN
fuelectenerg-7534	626	2	)	)	PUNCT
fuelectenerg-7534	627	1	,	,	PUNCT
fuelectenerg-7534	627	2	vol	vol	NOUN
fuelectenerg-7534	627	3	.	.	PROPN
fuelectenerg-7534	627	4	1	1	NUM
fuelectenerg-7534	627	5	,	,	PUNCT
fuelectenerg-7534	627	6	pp	pp	ADJ
fuelectenerg-7534	627	7	.	.	PUNCT
fuelectenerg-7534	628	1	283–286	283–286	NUM
fuelectenerg-7534	628	2	,	,	PUNCT
fuelectenerg-7534	628	3	2000	2000	NUM
fuelectenerg-7534	628	4	.	.	PUNCT
fuelectenerg-7534	629	1	[	[	X
fuelectenerg-7534	629	2	38	38	NUM
fuelectenerg-7534	629	3	]	]	PUNCT
fuelectenerg-7534	629	4	a.	a.	NOUN
fuelectenerg-7534	629	5	persano	persano	PROPN
fuelectenerg-7534	629	6	,	,	PUNCT
fuelectenerg-7534	629	7	a.	a.	PROPN
fuelectenerg-7534	629	8	cola	cola	PROPN
fuelectenerg-7534	629	9	,	,	PUNCT
fuelectenerg-7534	629	10	g.	g.	PROPN
fuelectenerg-7534	629	11	de	de	PROPN
fuelectenerg-7534	629	12	angelis	angelis	PROPN
fuelectenerg-7534	629	13	,	,	PUNCT
fuelectenerg-7534	629	14	a.	a.	PROPN
fuelectenerg-7534	629	15	taurino	taurino	PROPN
fuelectenerg-7534	629	16	,	,	PUNCT
fuelectenerg-7534	629	17	p.	p.	PROPN
fuelectenerg-7534	629	18	siciliano	siciliano	PROPN
fuelectenerg-7534	629	19	,	,	PUNCT
fuelectenerg-7534	629	20	and	and	CCONJ
fuelectenerg-7534	629	21	f.	f.	PROPN
fuelectenerg-7534	629	22	quaranta	quaranta	PROPN
fuelectenerg-7534	629	23	.	.	PUNCT
fuelectenerg-7534	630	1	“	"	PUNCT
fuelectenerg-7534	630	2	capacitive	capacitive	ADJ
fuelectenerg-7534	630	3	rf	rf	NOUN
fuelectenerg-7534	630	4	mems	mem	NOUN
fuelectenerg-7534	630	5	switches	switch	NOUN
fuelectenerg-7534	630	6	with	with	ADP
fuelectenerg-7534	630	7	tantalum	tantalum	NOUN
fuelectenerg-7534	630	8	-	-	PUNCT
fuelectenerg-7534	630	9	based	base	VERB
fuelectenerg-7534	630	10	materials	material	NOUN
fuelectenerg-7534	630	11	”	"	PUNCT
fuelectenerg-7534	630	12	,	,	PUNCT
fuelectenerg-7534	630	13	journal	journal	NOUN
fuelectenerg-7534	630	14	of	of	ADP
fuelectenerg-7534	630	15	microelectromechanical	microelectromechanical	ADJ
fuelectenerg-7534	630	16	systems	system	NOUN
fuelectenerg-7534	630	17	,	,	PUNCT
fuelectenerg-7534	630	18	vol	vol	NOUN
fuelectenerg-7534	630	19	.	.	PROPN
fuelectenerg-7534	630	20	20	20	NUM
fuelectenerg-7534	630	21	,	,	PUNCT
fuelectenerg-7534	630	22	no	no	INTJ
fuelectenerg-7534	630	23	.	.	NOUN
fuelectenerg-7534	630	24	2	2	NUM
fuelectenerg-7534	630	25	,	,	PUNCT
fuelectenerg-7534	630	26	pp	pp	ADJ
fuelectenerg-7534	630	27	.	.	PUNCT
fuelectenerg-7534	631	1	365–370	365–370	NUM
fuelectenerg-7534	631	2	,	,	PUNCT
fuelectenerg-7534	631	3	2011	2011	NUM
fuelectenerg-7534	631	4	.	.	PUNCT
fuelectenerg-7534	632	1	[	[	X
fuelectenerg-7534	632	2	39	39	NUM
fuelectenerg-7534	632	3	]	]	PUNCT
fuelectenerg-7534	632	4	m.	m.	NOUN
fuelectenerg-7534	632	5	angira	angira	PROPN
fuelectenerg-7534	632	6	,	,	PUNCT
fuelectenerg-7534	632	7	g.m	g.m	PROPN
fuelectenerg-7534	632	8	.	.	PROPN
fuelectenerg-7534	632	9	sundram	sundram	PROPN
fuelectenerg-7534	632	10	,	,	PUNCT
fuelectenerg-7534	632	11	k.	k.	PROPN
fuelectenerg-7534	632	12	rangra	rangra	PROPN
fuelectenerg-7534	632	13	,	,	PUNCT
fuelectenerg-7534	632	14	d.	d.	PROPN
fuelectenerg-7534	632	15	bansal	bansal	PROPN
fuelectenerg-7534	632	16	,	,	PUNCT
fuelectenerg-7534	632	17	and	and	CCONJ
fuelectenerg-7534	632	18	k.	k.	PROPN
fuelectenerg-7534	632	19	maninder	maninder	PROPN
fuelectenerg-7534	632	20	,	,	PUNCT
fuelectenerg-7534	632	21	“	"	PUNCT
fuelectenerg-7534	632	22	on	on	ADP
fuelectenerg-7534	632	23	the	the	DET
fuelectenerg-7534	632	24	investigation	investigation	NOUN
fuelectenerg-7534	632	25	of	of	ADP
fuelectenerg-7534	632	26	an	an	DET
fuelectenerg-7534	632	27	interdigitated	interdigitated	ADJ
fuelectenerg-7534	632	28	,	,	PUNCT
fuelectenerg-7534	632	29	high	high	ADJ
fuelectenerg-7534	632	30	capacitance	capacitance	NOUN
fuelectenerg-7534	632	31	ratio	ratio	NOUN
fuelectenerg-7534	632	32	shunt	shunt	VERB
fuelectenerg-7534	632	33	rf	rf	ADJ
fuelectenerg-7534	632	34	-	-	PUNCT
fuelectenerg-7534	632	35	mems	mems	ADJ
fuelectenerg-7534	632	36	switch	switch	NOUN
fuelectenerg-7534	632	37	for	for	ADP
fuelectenerg-7534	632	38	xband	xband	PROPN
fuelectenerg-7534	632	39	applications	application	NOUN
fuelectenerg-7534	632	40	”	"	PUNCT
fuelectenerg-7534	632	41	,	,	PUNCT
fuelectenerg-7534	632	42	05	05	NUM
fuelectenerg-7534	632	43	,	,	PUNCT
fuelectenerg-7534	632	44	2013	2013	NUM
fuelectenerg-7534	632	45	.	.	PUNCT
fuelectenerg-7534	633	1	[	[	X
fuelectenerg-7534	633	2	40	40	NUM
fuelectenerg-7534	633	3	]	]	PUNCT
fuelectenerg-7534	633	4	v.	v.	ADP
fuelectenerg-7534	633	5	mulloni	mulloni	PROPN
fuelectenerg-7534	633	6	,	,	PUNCT
fuelectenerg-7534	633	7	f.	f.	PROPN
fuelectenerg-7534	633	8	solazzi	solazzi	PROPN
fuelectenerg-7534	633	9	,	,	PUNCT
fuelectenerg-7534	633	10	g.	g.	PROPN
fuelectenerg-7534	633	11	resta	resta	PROPN
fuelectenerg-7534	633	12	,	,	PUNCT
fuelectenerg-7534	633	13	f.	f.	PROPN
fuelectenerg-7534	633	14	giacomozzi	giacomozzi	NOUN
fuelectenerg-7534	633	15	,	,	PUNCT
fuelectenerg-7534	633	16	and	and	CCONJ
fuelectenerg-7534	633	17	b.	b.	PROPN
fuelectenerg-7534	633	18	margesin	margesin	PROPN
fuelectenerg-7534	633	19	,	,	PUNCT
fuelectenerg-7534	633	20	“	"	PUNCT
fuelectenerg-7534	633	21	rf	rf	ADJ
fuelectenerg-7534	633	22	-	-	PUNCT
fuelectenerg-7534	633	23	mems	mems	ADJ
fuelectenerg-7534	633	24	switch	switch	NOUN
fuelectenerg-7534	633	25	design	design	NOUN
fuelectenerg-7534	633	26	optimization	optimization	NOUN
fuelectenerg-7534	633	27	for	for	ADP
fuelectenerg-7534	633	28	long	long	ADJ
fuelectenerg-7534	633	29	-	-	PUNCT
fuelectenerg-7534	633	30	term	term	NOUN
fuelectenerg-7534	633	31	reliability	reliability	NOUN
fuelectenerg-7534	633	32	”	"	PUNCT
fuelectenerg-7534	633	33	in	in	ADP
fuelectenerg-7534	633	34	proceedings	proceeding	NOUN
fuelectenerg-7534	633	35	of	of	ADP
fuelectenerg-7534	633	36	the	the	DET
fuelectenerg-7534	633	37	2013	2013	NUM
fuelectenerg-7534	633	38	symposium	symposium	NOUN
fuelectenerg-7534	633	39	on	on	ADP
fuelectenerg-7534	633	40	design	design	NOUN
fuelectenerg-7534	633	41	,	,	PUNCT
fuelectenerg-7534	633	42	test	test	NOUN
fuelectenerg-7534	633	43	,	,	PUNCT
fuelectenerg-7534	633	44	integration	integration	NOUN
fuelectenerg-7534	633	45	and	and	CCONJ
fuelectenerg-7534	633	46	packaging	packaging	NOUN
fuelectenerg-7534	633	47	of	of	ADP
fuelectenerg-7534	633	48	mems	mem	NOUN
fuelectenerg-7534	633	49	/	/	SYM
fuelectenerg-7534	633	50	moems	moem	NOUN
fuelectenerg-7534	633	51	(	(	PUNCT
fuelectenerg-7534	633	52	dtip	dtip	NOUN
fuelectenerg-7534	633	53	)	)	PUNCT
fuelectenerg-7534	633	54	,	,	PUNCT
fuelectenerg-7534	633	55	2013	2013	NUM
fuelectenerg-7534	633	56	,	,	PUNCT
fuelectenerg-7534	633	57	pp	pp	ADJ
fuelectenerg-7534	633	58	.	.	PUNCT
fuelectenerg-7534	634	1	1–6	1–6	X
fuelectenerg-7534	634	2	.	.	PUNCT
fuelectenerg-7534	635	1	[	[	X
fuelectenerg-7534	635	2	41	41	NUM
fuelectenerg-7534	635	3	]	]	X
fuelectenerg-7534	635	4	p.	p.	NOUN
fuelectenerg-7534	635	5	blondy	blondy	PROPN
fuelectenerg-7534	635	6	,	,	PUNCT
fuelectenerg-7534	635	7	a.	a.	NOUN
fuelectenerg-7534	635	8	crunteanu	crunteanu	PROPN
fuelectenerg-7534	635	9	,	,	PUNCT
fuelectenerg-7534	635	10	c.	c.	PROPN
fuelectenerg-7534	635	11	champeaux	champeaux	PROPN
fuelectenerg-7534	635	12	,	,	PUNCT
fuelectenerg-7534	635	13	a.	a.	NOUN
fuelectenerg-7534	635	14	catherinot	catherinot	PROPN
fuelectenerg-7534	635	15	,	,	PUNCT
fuelectenerg-7534	635	16	p.	p.	NOUN
fuelectenerg-7534	635	17	tristant	tristant	NOUN
fuelectenerg-7534	635	18	,	,	PUNCT
fuelectenerg-7534	635	19	o.	o.	NOUN
fuelectenerg-7534	635	20	vendier	vendier	NOUN
fuelectenerg-7534	635	21	,	,	PUNCT
fuelectenerg-7534	635	22	j.	j.	PROPN
fuelectenerg-7534	635	23	l.	l.	PROPN
fuelectenerg-7534	635	24	cazaux	cazaux	PROPN
fuelectenerg-7534	635	25	,	,	PUNCT
fuelectenerg-7534	635	26	and	and	CCONJ
fuelectenerg-7534	635	27	l.	l.	PROPN
fuelectenerg-7534	635	28	marchand	marchand	PROPN
fuelectenerg-7534	635	29	,	,	PUNCT
fuelectenerg-7534	635	30	“	"	PUNCT
fuelectenerg-7534	635	31	dielectric	dielectric	ADJ
fuelectenerg-7534	635	32	less	less	ADV
fuelectenerg-7534	635	33	capacitive	capacitive	ADJ
fuelectenerg-7534	635	34	mems	mem	NOUN
fuelectenerg-7534	635	35	switches	switch	NOUN
fuelectenerg-7534	635	36	”	"	PUNCT
fuelectenerg-7534	635	37	,	,	PUNCT
fuelectenerg-7534	635	38	in	in	ADP
fuelectenerg-7534	635	39	proceedings	proceeding	NOUN
fuelectenerg-7534	635	40	of	of	ADP
fuelectenerg-7534	635	41	the	the	DET
fuelectenerg-7534	635	42	2004	2004	NUM
fuelectenerg-7534	635	43	ieee	ieee	NOUN
fuelectenerg-7534	635	44	mtt	mtt	PROPN
fuelectenerg-7534	635	45	-	-	PUNCT
fuelectenerg-7534	635	46	s	s	NOUN
fuelectenerg-7534	635	47	international	international	ADJ
fuelectenerg-7534	635	48	microwave	microwave	NOUN
fuelectenerg-7534	635	49	symposium	symposium	NOUN
fuelectenerg-7534	635	50	digest	digest	NOUN
fuelectenerg-7534	635	51	(	(	PUNCT
fuelectenerg-7534	635	52	ieee	ieee	NOUN
fuelectenerg-7534	635	53	cat	cat	NOUN
fuelectenerg-7534	635	54	.	.	PUNCT
fuelectenerg-7534	636	1	no.04ch37535	no.04ch37535	PROPN
fuelectenerg-7534	636	2	)	)	PUNCT
fuelectenerg-7534	636	3	,	,	PUNCT
fuelectenerg-7534	636	4	vol	vol	NOUN
fuelectenerg-7534	636	5	2	2	NUM
fuelectenerg-7534	636	6	,	,	PUNCT
fuelectenerg-7534	636	7	pp	pp	ADJ
fuelectenerg-7534	636	8	.	.	PUNCT
fuelectenerg-7534	637	1	573–576	573–576	NUM
fuelectenerg-7534	637	2	,	,	PUNCT
fuelectenerg-7534	637	3	2004	2004	NUM
fuelectenerg-7534	637	4	.	.	PUNCT
fuelectenerg-7534	638	1	[	[	X
fuelectenerg-7534	638	2	42	42	NUM
fuelectenerg-7534	638	3	]	]	X
fuelectenerg-7534	638	4	f.	f.	PROPN
fuelectenerg-7534	638	5	ke	ke	PROPN
fuelectenerg-7534	638	6	,	,	PUNCT
fuelectenerg-7534	638	7	j.	j.	PROPN
fuelectenerg-7534	638	8	miao	miao	PROPN
fuelectenerg-7534	638	9	,	,	PUNCT
fuelectenerg-7534	638	10	and	and	CCONJ
fuelectenerg-7534	638	11	j.	j.	PROPN
fuelectenerg-7534	638	12	oberhammer	oberhammer	PROPN
fuelectenerg-7534	638	13	,	,	PUNCT
fuelectenerg-7534	638	14	“	"	PUNCT
fuelectenerg-7534	638	15	a	a	DET
fuelectenerg-7534	638	16	ruthenium	ruthenium	NOUN
fuelectenerg-7534	638	17	-	-	PUNCT
fuelectenerg-7534	638	18	based	base	VERB
fuelectenerg-7534	638	19	multimetal	multimetal	ADJ
fuelectenerg-7534	638	20	-	-	PUNCT
fuelectenerg-7534	638	21	contact	contact	NOUN
fuelectenerg-7534	638	22	rf	rf	NOUN
fuelectenerg-7534	638	23	mems	mems	PROPN
fuelectenerg-7534	638	24	switch	switch	VERB
fuelectenerg-7534	638	25	with	with	ADP
fuelectenerg-7534	638	26	a	a	DET
fuelectenerg-7534	638	27	corrugated	corrugate	VERB
fuelectenerg-7534	638	28	diaphragm	diaphragm	NOUN
fuelectenerg-7534	638	29	”	"	PUNCT
fuelectenerg-7534	638	30	,	,	PUNCT
fuelectenerg-7534	638	31	journal	journal	NOUN
fuelectenerg-7534	638	32	of	of	ADP
fuelectenerg-7534	638	33	microelectromechanical	microelectromechanical	ADJ
fuelectenerg-7534	638	34	systems	system	NOUN
fuelectenerg-7534	638	35	,	,	PUNCT
fuelectenerg-7534	638	36	vol	vol	NOUN
fuelectenerg-7534	638	37	.	.	PROPN
fuelectenerg-7534	638	38	17	17	NUM
fuelectenerg-7534	638	39	,	,	PUNCT
fuelectenerg-7534	638	40	no	no	INTJ
fuelectenerg-7534	638	41	.	.	NOUN
fuelectenerg-7534	638	42	6	6	NUM
fuelectenerg-7534	638	43	,	,	PUNCT
fuelectenerg-7534	638	44	pp	pp	ADJ
fuelectenerg-7534	638	45	.	.	PUNCT
fuelectenerg-7534	638	46	1447–1459	1447–1459	NUM
fuelectenerg-7534	638	47	,	,	PUNCT
fuelectenerg-7534	638	48	2008	2008	NUM
fuelectenerg-7534	638	49	.	.	PUNCT
fuelectenerg-7534	639	1	[	[	X
fuelectenerg-7534	639	2	43	43	NUM
fuelectenerg-7534	639	3	]	]	X
fuelectenerg-7534	639	4	c.	c.	PROPN
fuelectenerg-7534	639	5	d.	d.	PROPN
fuelectenerg-7534	639	6	patel	patel	PROPN
fuelectenerg-7534	639	7	and	and	CCONJ
fuelectenerg-7534	639	8	g.	g.	PROPN
fuelectenerg-7534	639	9	m.	m.	PROPN
fuelectenerg-7534	639	10	rebeiz	rebeiz	PROPN
fuelectenerg-7534	639	11	,	,	PUNCT
fuelectenerg-7534	639	12	“	"	PUNCT
fuelectenerg-7534	639	13	a	a	DET
fuelectenerg-7534	639	14	high	high	ADJ
fuelectenerg-7534	639	15	-	-	PUNCT
fuelectenerg-7534	639	16	reliability	reliability	NOUN
fuelectenerg-7534	639	17	high	high	ADJ
fuelectenerg-7534	639	18	-	-	PUNCT
fuelectenerg-7534	639	19	linearity	linearity	NOUN
fuelectenerg-7534	639	20	high	high	ADJ
fuelectenerg-7534	639	21	-	-	PUNCT
fuelectenerg-7534	639	22	power	power	NOUN
fuelectenerg-7534	639	23	rf	rf	NOUN
fuelectenerg-7534	639	24	mems	mems	PROPN
fuelectenerg-7534	639	25	metal	metal	NOUN
fuelectenerg-7534	639	26	-	-	PUNCT
fuelectenerg-7534	639	27	contact	contact	NOUN
fuelectenerg-7534	639	28	switch	switch	NOUN
fuelectenerg-7534	639	29	for	for	ADP
fuelectenerg-7534	639	30	dc-40	dc-40	ADJ
fuelectenerg-7534	639	31	-	-	PUNCT
fuelectenerg-7534	639	32	ghz	ghz	NOUN
fuelectenerg-7534	639	33	applications	application	NOUN
fuelectenerg-7534	639	34	”	"	PUNCT
fuelectenerg-7534	639	35	ieee	ieee	NOUN
fuelectenerg-7534	639	36	transactions	transaction	NOUN
fuelectenerg-7534	639	37	on	on	ADP
fuelectenerg-7534	639	38	microwave	microwave	NOUN
fuelectenerg-7534	639	39	theory	theory	NOUN
fuelectenerg-7534	639	40	and	and	CCONJ
fuelectenerg-7534	639	41	techniques	technique	NOUN
fuelectenerg-7534	639	42	,	,	PUNCT
fuelectenerg-7534	639	43	vol	vol	NOUN
fuelectenerg-7534	639	44	.	.	PROPN
fuelectenerg-7534	639	45	60	60	NUM
fuelectenerg-7534	639	46	,	,	PUNCT
fuelectenerg-7534	639	47	no	no	INTJ
fuelectenerg-7534	639	48	.	.	NOUN
fuelectenerg-7534	639	49	10	10	NUM
fuelectenerg-7534	639	50	,	,	PUNCT
fuelectenerg-7534	639	51	pp	pp	ADJ
fuelectenerg-7534	639	52	.	.	PUNCT
fuelectenerg-7534	640	1	3096–3112	3096–3112	NUM
fuelectenerg-7534	640	2	,	,	PUNCT
fuelectenerg-7534	640	3	2012	2012	NUM
fuelectenerg-7534	640	4	.	.	PUNCT
fuelectenerg-7534	641	1	[	[	X
fuelectenerg-7534	641	2	44	44	NUM
fuelectenerg-7534	641	3	]	]	PUNCT
fuelectenerg-7534	641	4	j.	j.	PROPN
fuelectenerg-7534	641	5	pal	pal	PROPN
fuelectenerg-7534	641	6	,	,	PUNCT
fuelectenerg-7534	641	7	y.	y.	PROPN
fuelectenerg-7534	641	8	zhu	zhu	PROPN
fuelectenerg-7534	641	9	,	,	PUNCT
fuelectenerg-7534	641	10	j.	j.	PROPN
fuelectenerg-7534	641	11	lu	lu	PROPN
fuelectenerg-7534	641	12	,	,	PUNCT
fuelectenerg-7534	641	13	d.	d.	PROPN
fuelectenerg-7534	641	14	dao	dao	PROPN
fuelectenerg-7534	641	15	,	,	PUNCT
fuelectenerg-7534	641	16	and	and	CCONJ
fuelectenerg-7534	641	17	f.	f.	PROPN
fuelectenerg-7534	641	18	khan	khan	PROPN
fuelectenerg-7534	641	19	,	,	PUNCT
fuelectenerg-7534	641	20	“	"	PUNCT
fuelectenerg-7534	641	21	high	high	ADJ
fuelectenerg-7534	641	22	power	power	NOUN
fuelectenerg-7534	641	23	and	and	CCONJ
fuelectenerg-7534	641	24	reliable	reliable	ADJ
fuelectenerg-7534	641	25	spst	spst	PROPN
fuelectenerg-7534	641	26	/	/	SYM
fuelectenerg-7534	641	27	sp3	sp3	PROPN
fuelectenerg-7534	641	28	t	t	NOUN
fuelectenerg-7534	641	29	rf	rf	NOUN
fuelectenerg-7534	641	30	mems	mems	PROPN
fuelectenerg-7534	641	31	switches	switch	NOUN
fuelectenerg-7534	641	32	for	for	ADP
fuelectenerg-7534	641	33	wireless	wireless	ADJ
fuelectenerg-7534	641	34	applications	application	NOUN
fuelectenerg-7534	641	35	”	"	PUNCT
fuelectenerg-7534	641	36	ieee	ieee	NOUN
fuelectenerg-7534	641	37	electron	electron	NOUN
fuelectenerg-7534	641	38	device	device	NOUN
fuelectenerg-7534	641	39	letters	letter	NOUN
fuelectenerg-7534	641	40	,	,	PUNCT
fuelectenerg-7534	641	41	vol	vol	NOUN
fuelectenerg-7534	641	42	.	.	PROPN
fuelectenerg-7534	641	43	37	37	NUM
fuelectenerg-7534	641	44	,	,	PUNCT
fuelectenerg-7534	641	45	no	no	INTJ
fuelectenerg-7534	641	46	.	.	NOUN
fuelectenerg-7534	641	47	9	9	NUM
fuelectenerg-7534	641	48	,	,	PUNCT
fuelectenerg-7534	641	49	pp	pp	ADJ
fuelectenerg-7534	641	50	.	.	PUNCT
fuelectenerg-7534	641	51	1219–1222	1219–1222	NUM
fuelectenerg-7534	641	52	,	,	PUNCT
fuelectenerg-7534	641	53	2016	2016	NUM
fuelectenerg-7534	641	54	.	.	PUNCT
fuelectenerg-7534	642	1	[	[	X
fuelectenerg-7534	642	2	45	45	NUM
fuelectenerg-7534	642	3	]	]	PUNCT
fuelectenerg-7534	642	4	m.	m.	NOUN
fuelectenerg-7534	642	5	fernandez	fernandez	PROPN
fuelectenerg-7534	642	6	-	-	PUNCT
fuelectenerg-7534	642	7	bolanos	bolanos	PROPN
fuelectenerg-7534	642	8	badia	badia	PROPN
fuelectenerg-7534	642	9	,	,	PUNCT
fuelectenerg-7534	642	10	e.	e.	PROPN
fuelectenerg-7534	642	11	buitrago	buitrago	PROPN
fuelectenerg-7534	642	12	,	,	PUNCT
fuelectenerg-7534	642	13	and	and	CCONJ
fuelectenerg-7534	642	14	a.	a.	NOUN
fuelectenerg-7534	642	15	m.	m.	NOUN
fuelectenerg-7534	642	16	ionescu	ionescu	PROPN
fuelectenerg-7534	642	17	,	,	PUNCT
fuelectenerg-7534	642	18	“	"	PUNCT
fuelectenerg-7534	642	19	rf	rf	ADJ
fuelectenerg-7534	642	20	mems	mem	NOUN
fuelectenerg-7534	642	21	shunt	shunt	VERB
fuelectenerg-7534	642	22	capacitive	capacitive	ADJ
fuelectenerg-7534	642	23	switches	switch	NOUN
fuelectenerg-7534	642	24	using	use	VERB
fuelectenerg-7534	642	25	aln	aln	PROPN
fuelectenerg-7534	642	26	compared	compare	VERB
fuelectenerg-7534	642	27	to	to	ADP
fuelectenerg-7534	642	28	si3n4	si3n4	PROPN
fuelectenerg-7534	642	29	dielectric	dielectric	NOUN
fuelectenerg-7534	642	30	”	"	PUNCT
fuelectenerg-7534	642	31	,	,	PUNCT
fuelectenerg-7534	642	32	journal	journal	NOUN
fuelectenerg-7534	642	33	of	of	ADP
fuelectenerg-7534	642	34	microelectromechanical	microelectromechanical	ADJ
fuelectenerg-7534	642	35	systems	system	NOUN
fuelectenerg-7534	642	36	,	,	PUNCT
fuelectenerg-7534	642	37	vol	vol	NOUN
fuelectenerg-7534	642	38	.	.	PROPN
fuelectenerg-7534	642	39	21	21	NUM
fuelectenerg-7534	642	40	,	,	PUNCT
fuelectenerg-7534	642	41	no	no	INTJ
fuelectenerg-7534	642	42	.	.	NOUN
fuelectenerg-7534	642	43	5	5	NUM
fuelectenerg-7534	642	44	,	,	PUNCT
fuelectenerg-7534	642	45	pp	pp	ADJ
fuelectenerg-7534	642	46	.	.	PUNCT
fuelectenerg-7534	642	47	1229	1229	NUM
fuelectenerg-7534	642	48	–	–	PUNCT
fuelectenerg-7534	642	49	1240	1240	NUM
fuelectenerg-7534	642	50	,	,	PUNCT
fuelectenerg-7534	642	51	2012	2012	NUM
fuelectenerg-7534	642	52	.	.	PUNCT
fuelectenerg-7534	643	1	a	a	DET
fuelectenerg-7534	643	2	comprehensive	comprehensive	ADJ
fuelectenerg-7534	643	3	overview	overview	NOUN
fuelectenerg-7534	643	4	of	of	ADP
fuelectenerg-7534	643	5	recent	recent	ADJ
fuelectenerg-7534	643	6	developments	development	NOUN
fuelectenerg-7534	643	7	in	in	ADP
fuelectenerg-7534	643	8	rf	rf	ADJ
fuelectenerg-7534	643	9	-	-	PUNCT
fuelectenerg-7534	643	10	mems	mems	ADJ
fuelectenerg-7534	643	11	technology	technology	NOUN
fuelectenerg-7534	643	12	363	363	NUM
fuelectenerg-7534	643	13	[	[	SYM
fuelectenerg-7534	643	14	46	46	NUM
fuelectenerg-7534	643	15	]	]	X
fuelectenerg-7534	643	16	c.	c.	PROPN
fuelectenerg-7534	643	17	harendt	harendt	PROPN
fuelectenerg-7534	643	18	,	,	PUNCT
fuelectenerg-7534	643	19	h.	h.	PROPN
fuelectenerg-7534	643	20	graf	graf	PROPN
fuelectenerg-7534	643	21	,	,	PUNCT
fuelectenerg-7534	643	22	b.	b.	PROPN
fuelectenerg-7534	643	23	hofflinger	hofflinger	PROPN
fuelectenerg-7534	643	24	,	,	PUNCT
fuelectenerg-7534	643	25	and	and	CCONJ
fuelectenerg-7534	643	26	e.	e.	PROPN
fuelectenerg-7534	643	27	penteker	penteker	PROPN
fuelectenerg-7534	643	28	,	,	PUNCT
fuelectenerg-7534	643	29	“	"	PUNCT
fuelectenerg-7534	643	30	silicon	silicon	NOUN
fuelectenerg-7534	643	31	fusion	fusion	NOUN
fuelectenerg-7534	643	32	bonding	bonding	NOUN
fuelectenerg-7534	643	33	and	and	CCONJ
fuelectenerg-7534	643	34	its	its	PRON
fuelectenerg-7534	643	35	characterization	characterization	NOUN
fuelectenerg-7534	643	36	”	"	PUNCT
fuelectenerg-7534	643	37	,	,	PUNCT
fuelectenerg-7534	643	38	journal	journal	NOUN
fuelectenerg-7534	643	39	of	of	ADP
fuelectenerg-7534	643	40	micromechanics	micromechanic	NOUN
fuelectenerg-7534	643	41	and	and	CCONJ
fuelectenerg-7534	643	42	microengineering	microengineering	NOUN
fuelectenerg-7534	643	43	,	,	PUNCT
fuelectenerg-7534	643	44	vol	vol	NOUN
fuelectenerg-7534	643	45	.	.	PROPN
fuelectenerg-7534	643	46	2	2	NUM
fuelectenerg-7534	643	47	,	,	PUNCT
fuelectenerg-7534	643	48	no	no	INTJ
fuelectenerg-7534	643	49	.	.	NOUN
fuelectenerg-7534	643	50	113	113	NUM
fuelectenerg-7534	643	51	,	,	PUNCT
fuelectenerg-7534	643	52	01	01	NUM
fuelectenerg-7534	643	53	,	,	PUNCT
fuelectenerg-7534	643	54	1999	1999	NUM
fuelectenerg-7534	643	55	.	.	PUNCT
fuelectenerg-7534	644	1	[	[	X
fuelectenerg-7534	644	2	47	47	NUM
fuelectenerg-7534	644	3	]	]	X
fuelectenerg-7534	644	4	w.	w.	PROPN
fuelectenerg-7534	644	5	tian	tian	PROPN
fuelectenerg-7534	644	6	,	,	PUNCT
fuelectenerg-7534	644	7	x.	x.	PROPN
fuelectenerg-7534	644	8	wang	wang	PROPN
fuelectenerg-7534	644	9	,	,	PUNCT
fuelectenerg-7534	644	10	j.	j.	PROPN
fuelectenerg-7534	644	11	niu	niu	PROPN
fuelectenerg-7534	644	12	,	,	PUNCT
fuelectenerg-7534	644	13	h.	h.	PROPN
fuelectenerg-7534	644	14	cui	cui	PROPN
fuelectenerg-7534	644	15	,	,	PUNCT
fuelectenerg-7534	644	16	y.	y.	PROPN
fuelectenerg-7534	644	17	chen	chen	PROPN
fuelectenerg-7534	644	18	,	,	PUNCT
fuelectenerg-7534	644	19	and	and	CCONJ
fuelectenerg-7534	644	20	y.	y.	PROPN
fuelectenerg-7534	644	21	zhang	zhang	PROPN
fuelectenerg-7534	644	22	,	,	PUNCT
fuelectenerg-7534	644	23	“	"	PUNCT
fuelectenerg-7534	644	24	research	research	NOUN
fuelectenerg-7534	644	25	status	status	NOUN
fuelectenerg-7534	644	26	of	of	ADP
fuelectenerg-7534	644	27	wafer	wafer	NOUN
fuelectenerg-7534	644	28	level	level	NOUN
fuelectenerg-7534	644	29	packaging	packaging	NOUN
fuelectenerg-7534	644	30	for	for	ADP
fuelectenerg-7534	644	31	rf	rf	NOUN
fuelectenerg-7534	644	32	mems	mem	NOUN
fuelectenerg-7534	644	33	switches	switch	NOUN
fuelectenerg-7534	644	34	”	"	PUNCT
fuelectenerg-7534	644	35	in	in	ADP
fuelectenerg-7534	644	36	proceedings	proceeding	NOUN
fuelectenerg-7534	644	37	of	of	ADP
fuelectenerg-7534	644	38	the	the	DET
fuelectenerg-7534	644	39	21st	21st	ADJ
fuelectenerg-7534	644	40	international	international	ADJ
fuelectenerg-7534	644	41	conference	conference	NOUN
fuelectenerg-7534	644	42	on	on	ADP
fuelectenerg-7534	644	43	electronic	electronic	ADJ
fuelectenerg-7534	644	44	packaging	packaging	NOUN
fuelectenerg-7534	644	45	technology	technology	NOUN
fuelectenerg-7534	644	46	(	(	PUNCT
fuelectenerg-7534	644	47	icept	icept	NOUN
fuelectenerg-7534	644	48	)	)	PUNCT
fuelectenerg-7534	644	49	”	"	PUNCT
fuelectenerg-7534	644	50	,	,	PUNCT
fuelectenerg-7534	644	51	2020	2020	NUM
fuelectenerg-7534	644	52	,	,	PUNCT
fuelectenerg-7534	644	53	pp	pp	ADV
fuelectenerg-7534	644	54	.	.	PUNCT
fuelectenerg-7534	645	1	1–5	1–5	X
fuelectenerg-7534	645	2	.	.	PUNCT
fuelectenerg-7534	646	1	[	[	X
fuelectenerg-7534	646	2	48	48	NUM
fuelectenerg-7534	646	3	]	]	PUNCT
fuelectenerg-7534	646	4	f.	f.	NOUN
fuelectenerg-7534	646	5	giacomozzi	giacomozzi	PROPN
fuelectenerg-7534	646	6	,	,	PUNCT
fuelectenerg-7534	646	7	v.	v.	ADP
fuelectenerg-7534	646	8	mulloni	mulloni	NOUN
fuelectenerg-7534	646	9	,	,	PUNCT
fuelectenerg-7534	646	10	s.	s.	PROPN
fuelectenerg-7534	646	11	colpo	colpo	PROPN
fuelectenerg-7534	646	12	,	,	PUNCT
fuelectenerg-7534	646	13	a.	a.	NOUN
fuelectenerg-7534	646	14	faes	faes	PROPN
fuelectenerg-7534	646	15	,	,	PUNCT
fuelectenerg-7534	646	16	g.	g.	PROPN
fuelectenerg-7534	646	17	sordo	sordo	PROPN
fuelectenerg-7534	646	18	,	,	PUNCT
fuelectenerg-7534	646	19	and	and	CCONJ
fuelectenerg-7534	646	20	s.	s.	PROPN
fuelectenerg-7534	646	21	girardi	girardi	PROPN
fuelectenerg-7534	646	22	,	,	PUNCT
fuelectenerg-7534	646	23	“	"	PUNCT
fuelectenerg-7534	646	24	rf	rf	ADJ
fuelectenerg-7534	646	25	-	-	PUNCT
fuelectenerg-7534	646	26	mems	mem	NOUN
fuelectenerg-7534	646	27	devices	device	NOUN
fuelectenerg-7534	646	28	packaging	packaging	NOUN
fuelectenerg-7534	646	29	by	by	ADP
fuelectenerg-7534	646	30	using	use	VERB
fuelectenerg-7534	646	31	quartz	quartz	NOUN
fuelectenerg-7534	646	32	caps	cap	NOUN
fuelectenerg-7534	646	33	and	and	CCONJ
fuelectenerg-7534	646	34	epoxy	epoxy	NOUN
fuelectenerg-7534	646	35	polymer	polymer	NOUN
fuelectenerg-7534	646	36	sealing	sealing	NOUN
fuelectenerg-7534	646	37	rings	ring	NOUN
fuelectenerg-7534	646	38	”	"	PUNCT
fuelectenerg-7534	646	39	,	,	PUNCT
fuelectenerg-7534	646	40	in	in	ADP
fuelectenerg-7534	646	41	proceedings	proceeding	NOUN
fuelectenerg-7534	646	42	of	of	ADP
fuelectenerg-7534	646	43	the	the	DET
fuelectenerg-7534	646	44	2013	2013	NUM
fuelectenerg-7534	646	45	symposium	symposium	NOUN
fuelectenerg-7534	646	46	on	on	ADP
fuelectenerg-7534	646	47	design	design	NOUN
fuelectenerg-7534	646	48	,	,	PUNCT
fuelectenerg-7534	646	49	test	test	NOUN
fuelectenerg-7534	646	50	,	,	PUNCT
fuelectenerg-7534	646	51	integration	integration	NOUN
fuelectenerg-7534	646	52	and	and	CCONJ
fuelectenerg-7534	646	53	packaging	packaging	NOUN
fuelectenerg-7534	646	54	of	of	ADP
fuelectenerg-7534	646	55	mems	mem	NOUN
fuelectenerg-7534	646	56	/	/	SYM
fuelectenerg-7534	646	57	moems	moem	NOUN
fuelectenerg-7534	646	58	(	(	PUNCT
fuelectenerg-7534	646	59	dtip	dtip	NOUN
fuelectenerg-7534	646	60	)	)	PUNCT
fuelectenerg-7534	646	61	,	,	PUNCT
fuelectenerg-7534	646	62	2013	2013	NUM
fuelectenerg-7534	646	63	,	,	PUNCT
fuelectenerg-7534	646	64	pp	pp	ADV
fuelectenerg-7534	646	65	1–6	1–6	NUM
fuelectenerg-7534	646	66	.	.	PUNCT
fuelectenerg-7534	647	1	[	[	X
fuelectenerg-7534	647	2	49	49	NUM
fuelectenerg-7534	647	3	]	]	PUNCT
fuelectenerg-7534	647	4	t.	t.	PROPN
fuelectenerg-7534	647	5	katsuki	katsuki	PROPN
fuelectenerg-7534	647	6	,	,	PUNCT
fuelectenerg-7534	647	7	t.	t.	PROPN
fuelectenerg-7534	647	8	nakatani	nakatani	PROPN
fuelectenerg-7534	647	9	,	,	PUNCT
fuelectenerg-7534	647	10	h.	h.	PROPN
fuelectenerg-7534	647	11	okuda	okuda	PROPN
fuelectenerg-7534	647	12	,	,	PUNCT
fuelectenerg-7534	647	13	o.	o.	PROPN
fuelectenerg-7534	647	14	toyoda	toyoda	PROPN
fuelectenerg-7534	647	15	,	,	PUNCT
fuelectenerg-7534	647	16	s.	s.	PROPN
fuelectenerg-7534	647	17	ueda	ueda	PROPN
fuelectenerg-7534	647	18	,	,	PUNCT
fuelectenerg-7534	647	19	and	and	CCONJ
fuelectenerg-7534	647	20	f.	f.	PROPN
fuelectenerg-7534	647	21	nakazawa	nakazawa	PROPN
fuelectenerg-7534	647	22	,	,	PUNCT
fuelectenerg-7534	647	23	“	"	PUNCT
fuelectenerg-7534	647	24	a	a	DET
fuelectenerg-7534	647	25	highly	highly	ADV
fuelectenerg-7534	647	26	reliable	reliable	ADJ
fuelectenerg-7534	647	27	singlecrystal	singlecrystal	ADJ
fuelectenerg-7534	647	28	silicon	silicon	NOUN
fuelectenerg-7534	647	29	rf	rf	ADJ
fuelectenerg-7534	647	30	-	-	PUNCT
fuelectenerg-7534	647	31	mems	mems	ADJ
fuelectenerg-7534	647	32	switch	switch	NOUN
fuelectenerg-7534	647	33	using	use	VERB
fuelectenerg-7534	647	34	au	au	ADV
fuelectenerg-7534	647	35	sub	sub	ADJ
fuelectenerg-7534	647	36	-	-	ADJ
fuelectenerg-7534	647	37	micron	micron	ADJ
fuelectenerg-7534	647	38	particles	particle	NOUN
fuelectenerg-7534	647	39	for	for	ADP
fuelectenerg-7534	647	40	wafer	wafer	NOUN
fuelectenerg-7534	647	41	level	level	NOUN
fuelectenerg-7534	647	42	ltcc	ltcc	ADP
fuelectenerg-7534	647	43	cap	cap	NOUN
fuelectenerg-7534	647	44	packaging	packaging	NOUN
fuelectenerg-7534	647	45	”	"	PUNCT
fuelectenerg-7534	647	46	,	,	PUNCT
fuelectenerg-7534	647	47	in	in	ADP
fuelectenerg-7534	647	48	proceedings	proceeding	NOUN
fuelectenerg-7534	647	49	of	of	ADP
fuelectenerg-7534	647	50	the	the	DET
fuelectenerg-7534	647	51	2nd	2nd	ADJ
fuelectenerg-7534	647	52	ieee	ieee	NOUN
fuelectenerg-7534	647	53	cpmt	cpmt	PROPN
fuelectenerg-7534	647	54	symposium	symposium	PROPN
fuelectenerg-7534	647	55	japan	japan	PROPN
fuelectenerg-7534	647	56	,	,	PUNCT
fuelectenerg-7534	647	57	2012	2012	NUM
fuelectenerg-7534	647	58	,	,	PUNCT
fuelectenerg-7534	647	59	pp	pp	ADV
fuelectenerg-7534	647	60	.	.	PUNCT
fuelectenerg-7534	648	1	1–4	1–4	NUM
fuelectenerg-7534	648	2	.	.	PUNCT
fuelectenerg-7534	649	1	[	[	X
fuelectenerg-7534	649	2	50	50	NUM
fuelectenerg-7534	649	3	]	]	PUNCT
fuelectenerg-7534	649	4	s.	s.	PROPN
fuelectenerg-7534	649	5	seok	seok	PROPN
fuelectenerg-7534	649	6	,	,	PUNCT
fuelectenerg-7534	649	7	j.	j.	PROPN
fuelectenerg-7534	649	8	kim	kim	PROPN
fuelectenerg-7534	649	9	,	,	PUNCT
fuelectenerg-7534	649	10	m.	m.	NOUN
fuelectenerg-7534	649	11	fryziel	fryziel	PROPN
fuelectenerg-7534	649	12	,	,	PUNCT
fuelectenerg-7534	649	13	n.	n.	PROPN
fuelectenerg-7534	649	14	rolland	rolland	PROPN
fuelectenerg-7534	649	15	,	,	PUNCT
fuelectenerg-7534	649	16	p.	p.	PROPN
fuelectenerg-7534	649	17	rolland	rolland	PROPN
fuelectenerg-7534	649	18	,	,	PUNCT
fuelectenerg-7534	649	19	h.	h.	PROPN
fuelectenerg-7534	649	20	maher	maher	PROPN
fuelectenerg-7534	649	21	,	,	PUNCT
fuelectenerg-7534	649	22	w.	w.	PROPN
fuelectenerg-7534	649	23	simon	simon	PROPN
fuelectenerg-7534	649	24	,	,	PUNCT
fuelectenerg-7534	649	25	and	and	CCONJ
fuelectenerg-7534	649	26	r.	r.	PROPN
fuelectenerg-7534	649	27	baggen	baggen	PROPN
fuelectenerg-7534	649	28	,	,	PUNCT
fuelectenerg-7534	649	29	“	"	PUNCT
fuelectenerg-7534	649	30	wafer	wafer	NOUN
fuelectenerg-7534	649	31	-	-	PUNCT
fuelectenerg-7534	649	32	level	level	NOUN
fuelectenerg-7534	649	33	bcb	bcb	NOUN
fuelectenerg-7534	649	34	cap	cap	NOUN
fuelectenerg-7534	649	35	packaging	packaging	NOUN
fuelectenerg-7534	649	36	of	of	ADP
fuelectenerg-7534	649	37	integrated	integrate	VERB
fuelectenerg-7534	649	38	mems	mem	NOUN
fuelectenerg-7534	649	39	switches	switch	NOUN
fuelectenerg-7534	649	40	with	with	ADP
fuelectenerg-7534	649	41	mmic	mmic	ADJ
fuelectenerg-7534	649	42	”	"	PUNCT
fuelectenerg-7534	649	43	,	,	PUNCT
fuelectenerg-7534	649	44	in	in	ADP
fuelectenerg-7534	649	45	proceedings	proceeding	NOUN
fuelectenerg-7534	649	46	of	of	ADP
fuelectenerg-7534	649	47	the	the	DET
fuelectenerg-7534	649	48	ieee	ieee	NOUN
fuelectenerg-7534	649	49	/	/	SYM
fuelectenerg-7534	649	50	mtt	mtt	PROPN
fuelectenerg-7534	649	51	-	-	PUNCT
fuelectenerg-7534	649	52	s	s	NOUN
fuelectenerg-7534	649	53	international	international	ADJ
fuelectenerg-7534	649	54	microwave	microwave	NOUN
fuelectenerg-7534	649	55	symposium	symposium	NOUN
fuelectenerg-7534	649	56	digest	digest	PROPN
fuelectenerg-7534	649	57	,	,	PUNCT
fuelectenerg-7534	649	58	2012	2012	NUM
fuelectenerg-7534	649	59	,	,	PUNCT
fuelectenerg-7534	649	60	pp	pp	ADV
fuelectenerg-7534	649	61	.	.	PUNCT
fuelectenerg-7534	650	1	1–3	1–3	NOUN
fuelectenerg-7534	650	2	.	.	PUNCT
fuelectenerg-7534	651	1	[	[	X
fuelectenerg-7534	651	2	51	51	NUM
fuelectenerg-7534	651	3	]	]	X
fuelectenerg-7534	651	4	r.	r.	PROPN
fuelectenerg-7534	651	5	goggin	goggin	PROPN
fuelectenerg-7534	651	6	,	,	PUNCT
fuelectenerg-7534	651	7	p.	p.	PROPN
fuelectenerg-7534	651	8	fitzgerald	fitzgerald	PROPN
fuelectenerg-7534	651	9	,	,	PUNCT
fuelectenerg-7534	651	10	b.	b.	PROPN
fuelectenerg-7534	651	11	stenson	stenson	PROPN
fuelectenerg-7534	651	12	,	,	PUNCT
fuelectenerg-7534	651	13	e.	e.	PROPN
fuelectenerg-7534	651	14	carty	carty	PROPN
fuelectenerg-7534	651	15	,	,	PUNCT
fuelectenerg-7534	651	16	and	and	CCONJ
fuelectenerg-7534	651	17	p.	p.	PROPN
fuelectenerg-7534	651	18	mcdaid	mcdaid	PROPN
fuelectenerg-7534	651	19	,	,	PUNCT
fuelectenerg-7534	651	20	“	"	PUNCT
fuelectenerg-7534	651	21	commercialization	commercialization	NOUN
fuelectenerg-7534	651	22	of	of	ADP
fuelectenerg-7534	651	23	a	a	DET
fuelectenerg-7534	651	24	reliable	reliable	ADJ
fuelectenerg-7534	651	25	rf	rf	NOUN
fuelectenerg-7534	651	26	mems	mem	NOUN
fuelectenerg-7534	651	27	switch	switch	VERB
fuelectenerg-7534	651	28	with	with	ADP
fuelectenerg-7534	651	29	integrated	integrate	VERB
fuelectenerg-7534	651	30	driver	driver	NOUN
fuelectenerg-7534	651	31	circuitry	circuitry	NOUN
fuelectenerg-7534	651	32	in	in	ADP
fuelectenerg-7534	651	33	a	a	DET
fuelectenerg-7534	651	34	miniature	miniature	ADJ
fuelectenerg-7534	651	35	qfn	qfn	NOUN
fuelectenerg-7534	651	36	package	package	NOUN
fuelectenerg-7534	651	37	for	for	ADP
fuelectenerg-7534	651	38	rf	rf	NOUN
fuelectenerg-7534	651	39	instrumentation	instrumentation	NOUN
fuelectenerg-7534	651	40	applications	application	NOUN
fuelectenerg-7534	651	41	”	"	PUNCT
fuelectenerg-7534	651	42	in	in	ADP
fuelectenerg-7534	651	43	proceedings	proceeding	NOUN
fuelectenerg-7534	651	44	of	of	ADP
fuelectenerg-7534	651	45	the	the	DET
fuelectenerg-7534	651	46	ieee	ieee	NOUN
fuelectenerg-7534	651	47	mtt	mtt	PROPN
fuelectenerg-7534	651	48	-	-	PUNCT
fuelectenerg-7534	651	49	s	s	PROPN
fuelectenerg-7534	651	50	international	international	ADJ
fuelectenerg-7534	651	51	microwave	microwave	NOUN
fuelectenerg-7534	651	52	symposium	symposium	NOUN
fuelectenerg-7534	651	53	,	,	PUNCT
fuelectenerg-7534	651	54	2015	2015	NUM
fuelectenerg-7534	651	55	,	,	PUNCT
fuelectenerg-7534	651	56	pp	pp	ADV
fuelectenerg-7534	651	57	.	.	PUNCT
fuelectenerg-7534	652	1	1–4	1–4	NUM
fuelectenerg-7534	652	2	.	.	PUNCT
fuelectenerg-7534	653	1	[	[	X
fuelectenerg-7534	653	2	52	52	NUM
fuelectenerg-7534	653	3	]	]	PUNCT
fuelectenerg-7534	653	4	i.	i.	NOUN
fuelectenerg-7534	653	5	comart	comart	PROPN
fuelectenerg-7534	653	6	,	,	PUNCT
fuelectenerg-7534	653	7	c.	c.	PROPN
fuelectenerg-7534	653	8	cetintepe	cetintepe	PROPN
fuelectenerg-7534	653	9	,	,	PUNCT
fuelectenerg-7534	653	10	e.	e.	PROPN
fuelectenerg-7534	653	11	sagiroglu	sagiroglu	PROPN
fuelectenerg-7534	653	12	,	,	PUNCT
fuelectenerg-7534	653	13	s.	s.	PROPN
fuelectenerg-7534	653	14	demir	demir	PROPN
fuelectenerg-7534	653	15	,	,	PUNCT
fuelectenerg-7534	653	16	and	and	CCONJ
fuelectenerg-7534	653	17	t.	t.	PROPN
fuelectenerg-7534	653	18	akin	akin	ADJ
fuelectenerg-7534	653	19	,	,	PUNCT
fuelectenerg-7534	653	20	“	"	PUNCT
fuelectenerg-7534	653	21	development	development	NOUN
fuelectenerg-7534	653	22	and	and	CCONJ
fuelectenerg-7534	653	23	modeling	modeling	NOUN
fuelectenerg-7534	653	24	of	of	ADP
fuelectenerg-7534	653	25	a	a	DET
fuelectenerg-7534	653	26	waferlevel	waferlevel	NOUN
fuelectenerg-7534	653	27	bcb	bcb	PROPN
fuelectenerg-7534	653	28	packaging	packaging	NOUN
fuelectenerg-7534	653	29	method	method	NOUN
fuelectenerg-7534	653	30	for	for	ADP
fuelectenerg-7534	653	31	capacitive	capacitive	ADJ
fuelectenerg-7534	653	32	rf	rf	ADJ
fuelectenerg-7534	653	33	mems	mem	NOUN
fuelectenerg-7534	653	34	switches	switch	NOUN
fuelectenerg-7534	653	35	”	"	PUNCT
fuelectenerg-7534	653	36	,	,	PUNCT
fuelectenerg-7534	653	37	journal	journal	NOUN
fuelectenerg-7534	653	38	of	of	ADP
fuelectenerg-7534	653	39	microelectromechanical	microelectromechanical	ADJ
fuelectenerg-7534	653	40	systems	system	NOUN
fuelectenerg-7534	653	41	,	,	PUNCT
fuelectenerg-7534	653	42	vol	vol	NOUN
fuelectenerg-7534	653	43	.	.	PROPN
fuelectenerg-7534	653	44	28	28	NUM
fuelectenerg-7534	653	45	,	,	PUNCT
fuelectenerg-7534	653	46	no	no	INTJ
fuelectenerg-7534	653	47	.	.	NOUN
fuelectenerg-7534	653	48	4	4	NUM
fuelectenerg-7534	653	49	,	,	PUNCT
fuelectenerg-7534	653	50	pp	pp	ADJ
fuelectenerg-7534	653	51	.	.	PUNCT
fuelectenerg-7534	654	1	724–731	724–731	NUM
fuelectenerg-7534	654	2	,	,	PUNCT
fuelectenerg-7534	654	3	2019	2019	NUM
fuelectenerg-7534	654	4	.	.	PUNCT
fuelectenerg-7534	655	1	[	[	X
fuelectenerg-7534	655	2	53	53	NUM
fuelectenerg-7534	655	3	]	]	PUNCT
fuelectenerg-7534	655	4	f.	f.	PROPN
fuelectenerg-7534	655	5	barriere	barriere	PROPN
fuelectenerg-7534	655	6	,	,	PUNCT
fuelectenerg-7534	655	7	a.	a.	NOUN
fuelectenerg-7534	655	8	crunteanu	crunteanu	PROPN
fuelectenerg-7534	655	9	,	,	PUNCT
fuelectenerg-7534	655	10	a.	a.	NOUN
fuelectenerg-7534	655	11	bessaudou	bessaudou	NOUN
fuelectenerg-7534	655	12	,	,	PUNCT
fuelectenerg-7534	655	13	a.	a.	NOUN
fuelectenerg-7534	655	14	pothier	pothier	PROPN
fuelectenerg-7534	655	15	,	,	PUNCT
fuelectenerg-7534	655	16	f.	f.	PROPN
fuelectenerg-7534	655	17	cosset	cosset	PROPN
fuelectenerg-7534	655	18	,	,	PUNCT
fuelectenerg-7534	655	19	d.	d.	PROPN
fuelectenerg-7534	655	20	mardivirin	mardivirin	NOUN
fuelectenerg-7534	655	21	,	,	PUNCT
fuelectenerg-7534	655	22	and	and	CCONJ
fuelectenerg-7534	655	23	p.	p.	NOUN
fuelectenerg-7534	655	24	blondy	blondy	NOUN
fuelectenerg-7534	655	25	.	.	PUNCT
fuelectenerg-7534	656	1	zero	zero	NUM
fuelectenerg-7534	656	2	level	level	NOUN
fuelectenerg-7534	656	3	metal	metal	NOUN
fuelectenerg-7534	656	4	thin	thin	ADJ
fuelectenerg-7534	656	5	film	film	NOUN
fuelectenerg-7534	656	6	package	package	NOUN
fuelectenerg-7534	656	7	for	for	ADP
fuelectenerg-7534	656	8	rf	rf	NOUN
fuelectenerg-7534	656	9	mems	mem	NOUN
fuelectenerg-7534	656	10	.	.	PUNCT
fuelectenerg-7534	657	1	in	in	ADP
fuelectenerg-7534	657	2	2010	2010	NUM
fuelectenerg-7534	657	3	topical	topical	ADJ
fuelectenerg-7534	657	4	meeting	meeting	NOUN
fuelectenerg-7534	657	5	on	on	ADP
fuelectenerg-7534	657	6	silicon	silicon	NOUN
fuelectenerg-7534	657	7	monolithic	monolithic	ADJ
fuelectenerg-7534	657	8	integrated	integrate	VERB
fuelectenerg-7534	657	9	circuits	circuit	NOUN
fuelectenerg-7534	657	10	in	in	ADP
fuelectenerg-7534	657	11	rf	rf	NOUN
fuelectenerg-7534	657	12	systems	system	NOUN
fuelectenerg-7534	657	13	(	(	PUNCT
fuelectenerg-7534	657	14	sirf	sirf	PROPN
fuelectenerg-7534	657	15	)	)	PUNCT
fuelectenerg-7534	657	16	,	,	PUNCT
fuelectenerg-7534	657	17	pages	page	VERB
fuelectenerg-7534	657	18	148	148	NUM
fuelectenerg-7534	657	19	-	-	SYM
fuelectenerg-7534	657	20	151	151	NUM
fuelectenerg-7534	657	21	,	,	PUNCT
fuelectenerg-7534	657	22	2010	2010	NUM
fuelectenerg-7534	657	23	.	.	PUNCT
fuelectenerg-7534	658	1	[	[	X
fuelectenerg-7534	658	2	54	54	NUM
fuelectenerg-7534	658	3	]	]	PUNCT
fuelectenerg-7534	658	4	k.	k.	PROPN
fuelectenerg-7534	658	5	nadaud	nadaud	PROPN
fuelectenerg-7534	658	6	,	,	PUNCT
fuelectenerg-7534	658	7	f.	f.	PROPN
fuelectenerg-7534	658	8	roubeau	roubeau	PROPN
fuelectenerg-7534	658	9	,	,	PUNCT
fuelectenerg-7534	658	10	a.	a.	NOUN
fuelectenerg-7534	658	11	pothier	pothier	PROPN
fuelectenerg-7534	658	12	,	,	PUNCT
fuelectenerg-7534	658	13	p.	p.	NOUN
fuelectenerg-7534	658	14	blondy	blondy	PROPN
fuelectenerg-7534	658	15	,	,	PUNCT
fuelectenerg-7534	658	16	l.	l.	PROPN
fuelectenerg-7534	658	17	zhang	zhang	PROPN
fuelectenerg-7534	658	18	,	,	PUNCT
fuelectenerg-7534	658	19	and	and	CCONJ
fuelectenerg-7534	658	20	r.	r.	PROPN
fuelectenerg-7534	658	21	stefanini	stefanini	PROPN
fuelectenerg-7534	658	22	,	,	PUNCT
fuelectenerg-7534	658	23	“	"	PUNCT
fuelectenerg-7534	658	24	high	high	ADJ
fuelectenerg-7534	658	25	q	q	NOUN
fuelectenerg-7534	658	26	zero	zero	NUM
fuelectenerg-7534	658	27	level	level	NOUN
fuelectenerg-7534	658	28	packaged	package	VERB
fuelectenerg-7534	658	29	rf	rf	NOUN
fuelectenerg-7534	658	30	-	-	PUNCT
fuelectenerg-7534	658	31	mems	mems	NOUN
fuelectenerg-7534	658	32	switched	switch	VERB
fuelectenerg-7534	658	33	capacitor	capacitor	NOUN
fuelectenerg-7534	658	34	arrays	array	NOUN
fuelectenerg-7534	658	35	”	"	PUNCT
fuelectenerg-7534	658	36	,	,	PUNCT
fuelectenerg-7534	658	37	in	in	ADP
fuelectenerg-7534	658	38	proceedings	proceeding	NOUN
fuelectenerg-7534	658	39	of	of	ADP
fuelectenerg-7534	658	40	the	the	DET
fuelectenerg-7534	658	41	11th	11th	ADJ
fuelectenerg-7534	658	42	european	european	ADJ
fuelectenerg-7534	658	43	microwave	microwave	PROPN
fuelectenerg-7534	658	44	integrated	integrate	VERB
fuelectenerg-7534	658	45	circuits	circuit	NOUN
fuelectenerg-7534	658	46	conference	conference	NOUN
fuelectenerg-7534	658	47	(	(	PUNCT
fuelectenerg-7534	658	48	eumic	eumic	ADJ
fuelectenerg-7534	658	49	)	)	PUNCT
fuelectenerg-7534	658	50	,	,	PUNCT
fuelectenerg-7534	658	51	2016	2016	NUM
fuelectenerg-7534	658	52	,	,	PUNCT
fuelectenerg-7534	658	53	pp	pp	ADV
fuelectenerg-7534	658	54	.	.	PUNCT
fuelectenerg-7534	659	1	448–451	448–451	NUM
fuelectenerg-7534	659	2	.	.	PUNCT
fuelectenerg-7534	660	1	[	[	X
fuelectenerg-7534	660	2	55	55	NUM
fuelectenerg-7534	660	3	]	]	X
fuelectenerg-7534	660	4	f.	f.	PROPN
fuelectenerg-7534	660	5	souchon	souchon	PROPN
fuelectenerg-7534	660	6	,	,	PUNCT
fuelectenerg-7534	660	7	d.	d.	PROPN
fuelectenerg-7534	660	8	saint	saint	PROPN
fuelectenerg-7534	660	9	-	-	PUNCT
fuelectenerg-7534	660	10	patrice	patrice	PROPN
fuelectenerg-7534	660	11	,	,	PUNCT
fuelectenerg-7534	660	12	j.	j.	PROPN
fuelectenerg-7534	660	13	l.	l.	PROPN
fuelectenerg-7534	660	14	pornin	pornin	PROPN
fuelectenerg-7534	660	15	,	,	PUNCT
fuelectenerg-7534	660	16	d.	d.	PROPN
fuelectenerg-7534	660	17	bouchu	bouchu	PROPN
fuelectenerg-7534	660	18	,	,	PUNCT
fuelectenerg-7534	660	19	c.	c.	PROPN
fuelectenerg-7534	660	20	baret	baret	PROPN
fuelectenerg-7534	660	21	,	,	PUNCT
fuelectenerg-7534	660	22	and	and	CCONJ
fuelectenerg-7534	660	23	b.	b.	PROPN
fuelectenerg-7534	660	24	reig	reig	PROPN
fuelectenerg-7534	660	25	,	,	PUNCT
fuelectenerg-7534	660	26	“	"	PUNCT
fuelectenerg-7534	660	27	thin	thin	ADJ
fuelectenerg-7534	660	28	film	film	NOUN
fuelectenerg-7534	660	29	packaged	package	VERB
fuelectenerg-7534	660	30	redundancy	redundancy	NOUN
fuelectenerg-7534	660	31	rf	rf	NOUN
fuelectenerg-7534	660	32	mems	mems	PROPN
fuelectenerg-7534	660	33	switches	switch	NOUN
fuelectenerg-7534	660	34	for	for	ADP
fuelectenerg-7534	660	35	space	space	NOUN
fuelectenerg-7534	660	36	applications	application	NOUN
fuelectenerg-7534	660	37	,	,	PUNCT
fuelectenerg-7534	660	38	in	in	ADP
fuelectenerg-7534	660	39	proceedings	proceeding	NOUN
fuelectenerg-7534	660	40	of	of	ADP
fuelectenerg-7534	660	41	the	the	DET
fuelectenerg-7534	660	42	19th	19th	ADJ
fuelectenerg-7534	660	43	international	international	ADJ
fuelectenerg-7534	660	44	conference	conference	NOUN
fuelectenerg-7534	660	45	on	on	ADP
fuelectenerg-7534	660	46	solid	solid	ADJ
fuelectenerg-7534	660	47	-	-	PUNCT
fuelectenerg-7534	660	48	state	state	NOUN
fuelectenerg-7534	660	49	sensors	sensor	NOUN
fuelectenerg-7534	660	50	,	,	PUNCT
fuelectenerg-7534	660	51	actuators	actuator	NOUN
fuelectenerg-7534	660	52	and	and	CCONJ
fuelectenerg-7534	660	53	microsystems	microsystem	NOUN
fuelectenerg-7534	660	54	(	(	PUNCT
fuelectenerg-7534	660	55	transducers	transducer	NOUN
fuelectenerg-7534	660	56	)	)	PUNCT
fuelectenerg-7534	660	57	,	,	PUNCT
fuelectenerg-7534	660	58	2017	2017	NUM
fuelectenerg-7534	660	59	,	,	PUNCT
fuelectenerg-7534	660	60	pp	pp	ADJ
fuelectenerg-7534	660	61	.	.	PUNCT
fuelectenerg-7534	661	1	175–178	175–178	NUM
fuelectenerg-7534	661	2	.	.	PUNCT
fuelectenerg-7534	662	1	[	[	X
fuelectenerg-7534	662	2	56	56	NUM
fuelectenerg-7534	662	3	]	]	X
fuelectenerg-7534	662	4	s.	s.	PROPN
fuelectenerg-7534	662	5	t.	t.	PROPN
fuelectenerg-7534	662	6	wipf	wipf	PROPN
fuelectenerg-7534	662	7	,	,	PUNCT
fuelectenerg-7534	662	8	a.	a.	NOUN
fuelectenerg-7534	662	9	goritz	goritz	PROPN
fuelectenerg-7534	662	10	,	,	PUNCT
fuelectenerg-7534	662	11	m.	m.	NOUN
fuelectenerg-7534	662	12	wietstruck	wietstruck	PROPN
fuelectenerg-7534	662	13	,	,	PUNCT
fuelectenerg-7534	662	14	c.	c.	PROPN
fuelectenerg-7534	662	15	wipf	wipf	PROPN
fuelectenerg-7534	662	16	,	,	PUNCT
fuelectenerg-7534	662	17	b.	b.	PROPN
fuelectenerg-7534	662	18	tillack	tillack	PROPN
fuelectenerg-7534	662	19	,	,	PUNCT
fuelectenerg-7534	662	20	a.	a.	PROPN
fuelectenerg-7534	662	21	mai	mai	PROPN
fuelectenerg-7534	662	22	,	,	PUNCT
fuelectenerg-7534	662	23	and	and	CCONJ
fuelectenerg-7534	662	24	m.	m.	NOUN
fuelectenerg-7534	662	25	kaynak	kaynak	PROPN
fuelectenerg-7534	662	26	,	,	PUNCT
fuelectenerg-7534	662	27	“	"	PUNCT
fuelectenerg-7534	662	28	thin	thin	ADJ
fuelectenerg-7534	662	29	film	film	NOUN
fuelectenerg-7534	662	30	wafer	wafer	NOUN
fuelectenerg-7534	662	31	level	level	NOUN
fuelectenerg-7534	662	32	encapsulated	encapsulate	VERB
fuelectenerg-7534	662	33	rf	rf	ADJ
fuelectenerg-7534	662	34	-	-	PUNCT
fuelectenerg-7534	662	35	mems	mems	ADJ
fuelectenerg-7534	662	36	switch	switch	NOUN
fuelectenerg-7534	662	37	for	for	ADP
fuelectenerg-7534	662	38	d	d	ADJ
fuelectenerg-7534	662	39	-	-	PUNCT
fuelectenerg-7534	662	40	band	band	NOUN
fuelectenerg-7534	662	41	applications	application	NOUN
fuelectenerg-7534	662	42	”	"	PUNCT
fuelectenerg-7534	662	43	in	in	ADP
fuelectenerg-7534	662	44	proceedings	proceeding	NOUN
fuelectenerg-7534	662	45	of	of	ADP
fuelectenerg-7534	662	46	the	the	DET
fuelectenerg-7534	662	47	11th	11th	ADJ
fuelectenerg-7534	662	48	european	european	ADJ
fuelectenerg-7534	662	49	microwave	microwave	PROPN
fuelectenerg-7534	662	50	integrated	integrate	VERB
fuelectenerg-7534	662	51	circuits	circuit	NOUN
fuelectenerg-7534	662	52	conference	conference	NOUN
fuelectenerg-7534	662	53	(	(	PUNCT
fuelectenerg-7534	662	54	eumic	eumic	ADJ
fuelectenerg-7534	662	55	)	)	PUNCT
fuelectenerg-7534	662	56	,	,	PUNCT
fuelectenerg-7534	662	57	2016	2016	NUM
fuelectenerg-7534	662	58	,	,	PUNCT
fuelectenerg-7534	662	59	pp	pp	ADJ
fuelectenerg-7534	662	60	.	.	PUNCT
fuelectenerg-7534	663	1	452–455	452–455	NUM
fuelectenerg-7534	663	2	.	.	PUNCT
fuelectenerg-7534	664	1	[	[	X
fuelectenerg-7534	664	2	57	57	NUM
fuelectenerg-7534	664	3	]	]	X
fuelectenerg-7534	664	4	n.	n.	NOUN
fuelectenerg-7534	664	5	belkadi	belkadi	NOUN
fuelectenerg-7534	664	6	,	,	PUNCT
fuelectenerg-7534	664	7	k.	k.	PROPN
fuelectenerg-7534	664	8	nadaud	nadaud	PROPN
fuelectenerg-7534	664	9	,	,	PUNCT
fuelectenerg-7534	664	10	c.	c.	PROPN
fuelectenerg-7534	664	11	hallepee	hallepee	PROPN
fuelectenerg-7534	664	12	,	,	PUNCT
fuelectenerg-7534	664	13	d.	d.	PROPN
fuelectenerg-7534	664	14	passerieux	passerieux	PROPN
fuelectenerg-7534	664	15	,	,	PUNCT
fuelectenerg-7534	664	16	and	and	CCONJ
fuelectenerg-7534	664	17	p.	p.	NOUN
fuelectenerg-7534	664	18	blondy	blondy	NOUN
fuelectenerg-7534	664	19	,	,	PUNCT
fuelectenerg-7534	664	20	zero	zero	NUM
fuelectenerg-7534	664	21	-	-	PUNCT
fuelectenerg-7534	664	22	level	level	NOUN
fuelectenerg-7534	664	23	packaged	package	VERB
fuelectenerg-7534	664	24	rf	rf	NOUN
fuelectenerg-7534	664	25	-	-	PUNCT
fuelectenerg-7534	664	26	mems	mems	NOUN
fuelectenerg-7534	664	27	switched	switch	VERB
fuelectenerg-7534	664	28	capacitors	capacitor	NOUN
fuelectenerg-7534	664	29	on	on	ADP
fuelectenerg-7534	664	30	glass	glass	NOUN
fuelectenerg-7534	664	31	substrates	substrate	NOUN
fuelectenerg-7534	664	32	,	,	PUNCT
fuelectenerg-7534	664	33	journal	journal	NOUN
fuelectenerg-7534	664	34	of	of	ADP
fuelectenerg-7534	664	35	microelectromechanical	microelectromechanical	ADJ
fuelectenerg-7534	664	36	systems	system	NOUN
fuelectenerg-7534	664	37	,	,	PUNCT
fuelectenerg-7534	664	38	vol	vol	NOUN
fuelectenerg-7534	664	39	.	.	PROPN
fuelectenerg-7534	664	40	29	29	NUM
fuelectenerg-7534	664	41	,	,	PUNCT
fuelectenerg-7534	664	42	no	no	INTJ
fuelectenerg-7534	664	43	.	.	PUNCT
fuelectenerg-7534	665	1	1pp	1pp	ADJ
fuelectenerg-7534	665	2	.	.	PUNCT
fuelectenerg-7534	666	1	109–116	109–116	NUM
fuelectenerg-7534	666	2	,	,	PUNCT
fuelectenerg-7534	666	3	2020	2020	NUM
fuelectenerg-7534	666	4	.	.	PUNCT
fuelectenerg-7534	667	1	[	[	X
fuelectenerg-7534	667	2	58	58	NUM
fuelectenerg-7534	667	3	]	]	PUNCT
fuelectenerg-7534	667	4	a.	a.	NOUN
fuelectenerg-7534	667	5	persano	persano	PROPN
fuelectenerg-7534	667	6	,	,	PUNCT
fuelectenerg-7534	667	7	f.	f.	PROPN
fuelectenerg-7534	667	8	quaranta	quaranta	PROPN
fuelectenerg-7534	667	9	,	,	PUNCT
fuelectenerg-7534	667	10	a.	a.	NOUN
fuelectenerg-7534	667	11	taurino	taurino	PROPN
fuelectenerg-7534	667	12	,	,	PUNCT
fuelectenerg-7534	667	13	p.	p.	PROPN
fuelectenerg-7534	667	14	siciliano	siciliano	PROPN
fuelectenerg-7534	667	15	,	,	PUNCT
fuelectenerg-7534	667	16	and	and	CCONJ
fuelectenerg-7534	667	17	j.	j.	PROPN
fuelectenerg-7534	667	18	iannacci	iannacci	PROPN
fuelectenerg-7534	667	19	,	,	PUNCT
fuelectenerg-7534	667	20	“	"	PUNCT
fuelectenerg-7534	667	21	thin	thin	ADJ
fuelectenerg-7534	667	22	film	film	NOUN
fuelectenerg-7534	667	23	encapsulation	encapsulation	NOUN
fuelectenerg-7534	667	24	for	for	ADP
fuelectenerg-7534	667	25	rf	rf	VERB
fuelectenerg-7534	667	26	mems	mem	NOUN
fuelectenerg-7534	667	27	in	in	ADP
fuelectenerg-7534	667	28	5	5	NUM
fuelectenerg-7534	667	29	g	g	NOUN
fuelectenerg-7534	667	30	and	and	CCONJ
fuelectenerg-7534	667	31	modern	modern	ADJ
fuelectenerg-7534	667	32	telecommunication	telecommunication	NOUN
fuelectenerg-7534	667	33	systems	system	NOUN
fuelectenerg-7534	667	34	”	"	PUNCT
fuelectenerg-7534	667	35	,	,	PUNCT
fuelectenerg-7534	667	36	sensors	sensor	NOUN
fuelectenerg-7534	667	37	,	,	PUNCT
fuelectenerg-7534	667	38	vol	vol	NOUN
fuelectenerg-7534	667	39	.	.	PROPN
fuelectenerg-7534	667	40	20	20	NUM
fuelectenerg-7534	667	41	,	,	PUNCT
fuelectenerg-7534	667	42	pp	pp	PROPN
fuelectenerg-7534	667	43	.	.	PUNCT
fuelectenerg-7534	668	1	1–12	1–12	NOUN
fuelectenerg-7534	668	2	,	,	PUNCT
fuelectenerg-7534	668	3	04	04	NUM
fuelectenerg-7534	668	4	,	,	PUNCT
fuelectenerg-7534	668	5	2020	2020	NUM
fuelectenerg-7534	668	6	.	.	PUNCT
fuelectenerg-7534	669	1	[	[	X
fuelectenerg-7534	669	2	59	59	NUM
fuelectenerg-7534	669	3	]	]	PUNCT
fuelectenerg-7534	669	4	a.	a.	NOUN
fuelectenerg-7534	669	5	malczewski	malczewski	PROPN
fuelectenerg-7534	669	6	,	,	PUNCT
fuelectenerg-7534	669	7	s.	s.	PROPN
fuelectenerg-7534	669	8	eshelman	eshelman	PROPN
fuelectenerg-7534	669	9	,	,	PUNCT
fuelectenerg-7534	669	10	b.	b.	PROPN
fuelectenerg-7534	669	11	pillans	pillans	PROPN
fuelectenerg-7534	669	12	,	,	PUNCT
fuelectenerg-7534	669	13	j.	j.	PROPN
fuelectenerg-7534	669	14	ehmke	ehmke	PROPN
fuelectenerg-7534	669	15	,	,	PUNCT
fuelectenerg-7534	669	16	and	and	CCONJ
fuelectenerg-7534	669	17	c.	c.	PROPN
fuelectenerg-7534	669	18	l.	l.	PROPN
fuelectenerg-7534	669	19	goldsmith	goldsmith	PROPN
fuelectenerg-7534	669	20	,	,	PUNCT
fuelectenerg-7534	669	21	“	"	PUNCT
fuelectenerg-7534	669	22	x	x	X
fuelectenerg-7534	669	23	-	-	NOUN
fuelectenerg-7534	669	24	band	band	ADJ
fuelectenerg-7534	669	25	rf	rf	NOUN
fuelectenerg-7534	669	26	mems	mem	NOUN
fuelectenerg-7534	669	27	phase	phase	NOUN
fuelectenerg-7534	669	28	shifters	shifter	NOUN
fuelectenerg-7534	669	29	for	for	ADP
fuelectenerg-7534	669	30	phased	phased	ADJ
fuelectenerg-7534	669	31	array	array	NOUN
fuelectenerg-7534	669	32	applications	application	NOUN
fuelectenerg-7534	669	33	”	"	PUNCT
fuelectenerg-7534	669	34	,	,	PUNCT
fuelectenerg-7534	669	35	ieee	ieee	NOUN
fuelectenerg-7534	669	36	microwave	microwave	NOUN
fuelectenerg-7534	669	37	and	and	CCONJ
fuelectenerg-7534	669	38	guided	guide	VERB
fuelectenerg-7534	669	39	wave	wave	NOUN
fuelectenerg-7534	669	40	letters	letter	NOUN
fuelectenerg-7534	669	41	,	,	PUNCT
fuelectenerg-7534	669	42	vol	vol	NOUN
fuelectenerg-7534	669	43	.	.	PROPN
fuelectenerg-7534	669	44	9	9	NUM
fuelectenerg-7534	669	45	,	,	PUNCT
fuelectenerg-7534	669	46	no	no	INTJ
fuelectenerg-7534	669	47	.	.	NOUN
fuelectenerg-7534	669	48	12	12	NUM
fuelectenerg-7534	669	49	,	,	PUNCT
fuelectenerg-7534	669	50	pp	pp	ADJ
fuelectenerg-7534	669	51	.	.	PUNCT
fuelectenerg-7534	670	1	517–519	517–519	NUM
fuelectenerg-7534	670	2	,	,	PUNCT
fuelectenerg-7534	670	3	1999	1999	NUM
fuelectenerg-7534	670	4	.	.	PUNCT
fuelectenerg-7534	671	1	[	[	X
fuelectenerg-7534	671	2	60	60	NUM
fuelectenerg-7534	671	3	]	]	PUNCT
fuelectenerg-7534	671	4	s.	s.	PROPN
fuelectenerg-7534	671	5	barker	barker	PROPN
fuelectenerg-7534	671	6	and	and	CCONJ
fuelectenerg-7534	671	7	g.	g.	PROPN
fuelectenerg-7534	671	8	m.	m.	PROPN
fuelectenerg-7534	671	9	rebeiz	rebeiz	PROPN
fuelectenerg-7534	671	10	,	,	PUNCT
fuelectenerg-7534	671	11	“	"	PUNCT
fuelectenerg-7534	671	12	distributed	distribute	VERB
fuelectenerg-7534	671	13	mems	mem	NOUN
fuelectenerg-7534	671	14	true	true	ADJ
fuelectenerg-7534	671	15	-	-	PUNCT
fuelectenerg-7534	671	16	time	time	NOUN
fuelectenerg-7534	671	17	delay	delay	NOUN
fuelectenerg-7534	671	18	phase	phase	NOUN
fuelectenerg-7534	671	19	shifters	shifter	NOUN
fuelectenerg-7534	671	20	and	and	CCONJ
fuelectenerg-7534	671	21	wide	wide	ADJ
fuelectenerg-7534	671	22	-	-	PUNCT
fuelectenerg-7534	671	23	band	band	NOUN
fuelectenerg-7534	671	24	switches	switch	NOUN
fuelectenerg-7534	671	25	”	"	PUNCT
fuelectenerg-7534	671	26	,	,	PUNCT
fuelectenerg-7534	671	27	ieee	ieee	NOUN
fuelectenerg-7534	671	28	transactions	transaction	NOUN
fuelectenerg-7534	671	29	on	on	ADP
fuelectenerg-7534	671	30	microwave	microwave	NOUN
fuelectenerg-7534	671	31	theory	theory	NOUN
fuelectenerg-7534	671	32	and	and	CCONJ
fuelectenerg-7534	671	33	techniques	technique	NOUN
fuelectenerg-7534	671	34	,	,	PUNCT
fuelectenerg-7534	671	35	vol	vol	NOUN
fuelectenerg-7534	671	36	.	.	PROPN
fuelectenerg-7534	671	37	46	46	NUM
fuelectenerg-7534	671	38	,	,	PUNCT
fuelectenerg-7534	671	39	no	no	INTJ
fuelectenerg-7534	671	40	.	.	NOUN
fuelectenerg-7534	671	41	11	11	NUM
fuelectenerg-7534	671	42	,	,	PUNCT
fuelectenerg-7534	671	43	pp	pp	ADJ
fuelectenerg-7534	671	44	.	.	PUNCT
fuelectenerg-7534	671	45	1881–1890	1881–1890	NUM
fuelectenerg-7534	671	46	,	,	PUNCT
fuelectenerg-7534	671	47	1998	1998	NUM
fuelectenerg-7534	671	48	.	.	PUNCT
fuelectenerg-7534	672	1	[	[	X
fuelectenerg-7534	672	2	61	61	NUM
fuelectenerg-7534	672	3	]	]	PUNCT
fuelectenerg-7534	672	4	a.	a.	PROPN
fuelectenerg-7534	672	5	s.	s.	PROPN
fuelectenerg-7534	672	6	nagra	nagra	PROPN
fuelectenerg-7534	672	7	and	and	CCONJ
fuelectenerg-7534	672	8	r.	r.	PROPN
fuelectenerg-7534	672	9	a.	a.	PROPN
fuelectenerg-7534	672	10	york	york	PROPN
fuelectenerg-7534	672	11	,	,	PUNCT
fuelectenerg-7534	672	12	“	"	PUNCT
fuelectenerg-7534	672	13	distributed	distribute	VERB
fuelectenerg-7534	672	14	analog	analog	NOUN
fuelectenerg-7534	672	15	phase	phase	NOUN
fuelectenerg-7534	672	16	shifters	shifter	NOUN
fuelectenerg-7534	672	17	with	with	ADP
fuelectenerg-7534	672	18	low	low	ADJ
fuelectenerg-7534	672	19	insertion	insertion	NOUN
fuelectenerg-7534	672	20	loss	loss	NOUN
fuelectenerg-7534	672	21	”	"	PUNCT
fuelectenerg-7534	672	22	,	,	PUNCT
fuelectenerg-7534	672	23	ieee	ieee	NOUN
fuelectenerg-7534	672	24	transactions	transaction	NOUN
fuelectenerg-7534	672	25	on	on	ADP
fuelectenerg-7534	672	26	microwave	microwave	NOUN
fuelectenerg-7534	672	27	theory	theory	NOUN
fuelectenerg-7534	672	28	and	and	CCONJ
fuelectenerg-7534	672	29	techniques	technique	NOUN
fuelectenerg-7534	672	30	,	,	PUNCT
fuelectenerg-7534	672	31	vol	vol	NOUN
fuelectenerg-7534	672	32	.	.	PROPN
fuelectenerg-7534	673	1	47	47	NUM
fuelectenerg-7534	673	2	,	,	PUNCT
fuelectenerg-7534	673	3	no	no	INTJ
fuelectenerg-7534	673	4	.	.	NOUN
fuelectenerg-7534	673	5	9	9	NUM
fuelectenerg-7534	673	6	,	,	PUNCT
fuelectenerg-7534	673	7	pp	pp	ADJ
fuelectenerg-7534	673	8	.	.	PUNCT
fuelectenerg-7534	674	1	1705–1711	1705–1711	NOUN
fuelectenerg-7534	674	2	,	,	PUNCT
fuelectenerg-7534	674	3	1999	1999	NUM
fuelectenerg-7534	674	4	.	.	PUNCT
fuelectenerg-7534	675	1	[	[	X
fuelectenerg-7534	675	2	62	62	NUM
fuelectenerg-7534	675	3	]	]	PUNCT
fuelectenerg-7534	675	4	s.	s.	PROPN
fuelectenerg-7534	675	5	koul	koul	PROPN
fuelectenerg-7534	675	6	and	and	CCONJ
fuelectenerg-7534	675	7	s.	s.	PROPN
fuelectenerg-7534	675	8	dey	dey	PROPN
fuelectenerg-7534	675	9	,	,	PUNCT
fuelectenerg-7534	675	10	“	"	PUNCT
fuelectenerg-7534	675	11	radio	radio	NOUN
fuelectenerg-7534	675	12	frequency	frequency	NOUN
fuelectenerg-7534	675	13	micromachined	micromachine	VERB
fuelectenerg-7534	675	14	switches	switch	NOUN
fuelectenerg-7534	675	15	,	,	PUNCT
fuelectenerg-7534	675	16	switching	switch	VERB
fuelectenerg-7534	675	17	networks	network	NOUN
fuelectenerg-7534	675	18	,	,	PUNCT
fuelectenerg-7534	675	19	and	and	CCONJ
fuelectenerg-7534	675	20	phase	phase	NOUN
fuelectenerg-7534	675	21	shifters	shifter	NOUN
fuelectenerg-7534	675	22	”	"	PUNCT
fuelectenerg-7534	675	23	,	,	PUNCT
fuelectenerg-7534	675	24	crc	crc	NOUN
fuelectenerg-7534	675	25	press	press	NOUN
fuelectenerg-7534	675	26	,	,	PUNCT
fuelectenerg-7534	675	27	may	may	AUX
fuelectenerg-7534	675	28	2019	2019	NUM
fuelectenerg-7534	675	29	.	.	PUNCT
fuelectenerg-7534	676	1	[	[	X
fuelectenerg-7534	676	2	63	63	NUM
fuelectenerg-7534	676	3	]	]	SYM
fuelectenerg-7534	676	4	y.a	y.a	PROPN
fuelectenerg-7534	676	5	.	.	PROPN
fuelectenerg-7534	676	6	wang	wang	PROPN
fuelectenerg-7534	676	7	,	,	PUNCT
fuelectenerg-7534	676	8	“	"	PUNCT
fuelectenerg-7534	676	9	rf	rf	ADJ
fuelectenerg-7534	676	10	mems	mem	NOUN
fuelectenerg-7534	676	11	switches	switch	NOUN
fuelectenerg-7534	676	12	and	and	CCONJ
fuelectenerg-7534	676	13	phase	phase	NOUN
fuelectenerg-7534	676	14	shifters	shifter	NOUN
fuelectenerg-7534	676	15	for	for	ADP
fuelectenerg-7534	676	16	3d	3d	NUM
fuelectenerg-7534	676	17	mmic	mmic	ADJ
fuelectenerg-7534	676	18	phased	phase	VERB
fuelectenerg-7534	676	19	array	array	NOUN
fuelectenerg-7534	676	20	antenna	antenna	NOUN
fuelectenerg-7534	676	21	systems	system	NOUN
fuelectenerg-7534	676	22	”	"	PUNCT
fuelectenerg-7534	676	23	,	,	PUNCT
fuelectenerg-7534	676	24	university	university	NOUN
fuelectenerg-7534	676	25	of	of	ADP
fuelectenerg-7534	676	26	cincinnati	cincinnati	PROPN
fuelectenerg-7534	676	27	,	,	PUNCT
fuelectenerg-7534	676	28	2002	2002	NUM
fuelectenerg-7534	676	29	.	.	PUNCT
fuelectenerg-7534	677	1	[	[	X
fuelectenerg-7534	677	2	64	64	NUM
fuelectenerg-7534	677	3	]	]	PUNCT
fuelectenerg-7534	677	4	a.	a.	NOUN
fuelectenerg-7534	677	5	chakraborty	chakraborty	PROPN
fuelectenerg-7534	677	6	and	and	CCONJ
fuelectenerg-7534	677	7	b.	b.	PROPN
fuelectenerg-7534	677	8	gupta	gupta	PROPN
fuelectenerg-7534	677	9	,	,	PUNCT
fuelectenerg-7534	677	10	“	"	PUNCT
fuelectenerg-7534	677	11	paradigm	paradigm	NOUN
fuelectenerg-7534	677	12	phase	phase	NOUN
fuelectenerg-7534	677	13	shift	shift	NOUN
fuelectenerg-7534	677	14	:	:	PUNCT
fuelectenerg-7534	677	15	rf	rf	NOUN
fuelectenerg-7534	677	16	mems	mem	NOUN
fuelectenerg-7534	677	17	phase	phase	NOUN
fuelectenerg-7534	677	18	shifters	shifter	NOUN
fuelectenerg-7534	677	19	:	:	PUNCT
fuelectenerg-7534	677	20	an	an	DET
fuelectenerg-7534	677	21	overview	overview	NOUN
fuelectenerg-7534	677	22	”	"	PUNCT
fuelectenerg-7534	677	23	,	,	PUNCT
fuelectenerg-7534	677	24	ieee	ieee	NOUN
fuelectenerg-7534	677	25	microwave	microwave	PROPN
fuelectenerg-7534	677	26	magazine	magazine	PROPN
fuelectenerg-7534	677	27	,	,	PUNCT
fuelectenerg-7534	677	28	vol	vol	NOUN
fuelectenerg-7534	677	29	.	.	PROPN
fuelectenerg-7534	677	30	18	18	NUM
fuelectenerg-7534	677	31	,	,	PUNCT
fuelectenerg-7534	677	32	no	no	INTJ
fuelectenerg-7534	677	33	.	.	NOUN
fuelectenerg-7534	677	34	1	1	NUM
fuelectenerg-7534	677	35	,	,	PUNCT
fuelectenerg-7534	677	36	pp	pp	ADJ
fuelectenerg-7534	677	37	.	.	PUNCT
fuelectenerg-7534	678	1	22–41	22–41	NUM
fuelectenerg-7534	678	2	,	,	PUNCT
fuelectenerg-7534	678	3	2017	2017	NUM
fuelectenerg-7534	678	4	.	.	PUNCT
fuelectenerg-7534	679	1	[	[	X
fuelectenerg-7534	679	2	65	65	NUM
fuelectenerg-7534	679	3	]	]	X
fuelectenerg-7534	679	4	g.	g.	PROPN
fuelectenerg-7534	679	5	m.	m.	PROPN
fuelectenerg-7534	679	6	rebeiz	rebeiz	PROPN
fuelectenerg-7534	679	7	,	,	PUNCT
fuelectenerg-7534	679	8	guan	guan	PROPN
fuelectenerg-7534	679	9	-	-	PUNCT
fuelectenerg-7534	679	10	leng	leng	PROPN
fuelectenerg-7534	679	11	tan	tan	PROPN
fuelectenerg-7534	679	12	,	,	PUNCT
fuelectenerg-7534	679	13	and	and	CCONJ
fuelectenerg-7534	679	14	j.	j.	PROPN
fuelectenerg-7534	679	15	s.	s.	PROPN
fuelectenerg-7534	679	16	hayden	hayden	PROPN
fuelectenerg-7534	679	17	,	,	PUNCT
fuelectenerg-7534	679	18	“	"	PUNCT
fuelectenerg-7534	679	19	rf	rf	ADJ
fuelectenerg-7534	679	20	mems	mem	NOUN
fuelectenerg-7534	679	21	phase	phase	NOUN
fuelectenerg-7534	679	22	shifters	shifter	NOUN
fuelectenerg-7534	679	23	:	:	PUNCT
fuelectenerg-7534	679	24	design	design	NOUN
fuelectenerg-7534	679	25	and	and	CCONJ
fuelectenerg-7534	679	26	applications	application	NOUN
fuelectenerg-7534	679	27	”	"	PUNCT
fuelectenerg-7534	679	28	,	,	PUNCT
fuelectenerg-7534	679	29	ieee	ieee	NOUN
fuelectenerg-7534	679	30	microwave	microwave	PROPN
fuelectenerg-7534	679	31	magazine	magazine	PROPN
fuelectenerg-7534	679	32	,	,	PUNCT
fuelectenerg-7534	679	33	vol	vol	NOUN
fuelectenerg-7534	679	34	.	.	PROPN
fuelectenerg-7534	680	1	3	3	NUM
fuelectenerg-7534	680	2	,	,	PUNCT
fuelectenerg-7534	680	3	no	no	INTJ
fuelectenerg-7534	680	4	.	.	NOUN
fuelectenerg-7534	680	5	2	2	NUM
fuelectenerg-7534	680	6	,	,	PUNCT
fuelectenerg-7534	680	7	pp	pp	ADJ
fuelectenerg-7534	680	8	.	.	PUNCT
fuelectenerg-7534	681	1	72–81	72–81	NUM
fuelectenerg-7534	681	2	,	,	PUNCT
fuelectenerg-7534	681	3	2002	2002	NUM
fuelectenerg-7534	681	4	.	.	PUNCT
fuelectenerg-7534	682	1	[	[	X
fuelectenerg-7534	682	2	66	66	NUM
fuelectenerg-7534	682	3	]	]	PUNCT
fuelectenerg-7534	682	4	j.	j.	PROPN
fuelectenerg-7534	682	5	lampen	lampen	PROPN
fuelectenerg-7534	682	6	,	,	PUNCT
fuelectenerg-7534	682	7	s.	s.	PROPN
fuelectenerg-7534	682	8	majumder	majumder	PROPN
fuelectenerg-7534	682	9	,	,	PUNCT
fuelectenerg-7534	682	10	c.	c.	PROPN
fuelectenerg-7534	682	11	ji	ji	PROPN
fuelectenerg-7534	682	12	,	,	PUNCT
fuelectenerg-7534	682	13	and	and	CCONJ
fuelectenerg-7534	682	14	j.	j.	PROPN
fuelectenerg-7534	682	15	maciel	maciel	PROPN
fuelectenerg-7534	682	16	,	,	PUNCT
fuelectenerg-7534	682	17	“	"	PUNCT
fuelectenerg-7534	682	18	low	low	ADJ
fuelectenerg-7534	682	19	-	-	PUNCT
fuelectenerg-7534	682	20	loss	loss	NOUN
fuelectenerg-7534	682	21	,	,	PUNCT
fuelectenerg-7534	682	22	mems	mem	NOUN
fuelectenerg-7534	682	23	based	base	VERB
fuelectenerg-7534	682	24	,	,	PUNCT
fuelectenerg-7534	682	25	broadband	broadband	NOUN
fuelectenerg-7534	682	26	phase	phase	NOUN
fuelectenerg-7534	682	27	shifters	shifter	NOUN
fuelectenerg-7534	682	28	”	"	PUNCT
fuelectenerg-7534	682	29	,	,	PUNCT
fuelectenerg-7534	682	30	in	in	ADP
fuelectenerg-7534	682	31	proceedings	proceeding	NOUN
fuelectenerg-7534	682	32	of	of	ADP
fuelectenerg-7534	682	33	the	the	DET
fuelectenerg-7534	682	34	ieee	ieee	NOUN
fuelectenerg-7534	682	35	international	international	ADJ
fuelectenerg-7534	682	36	symposium	symposium	NOUN
fuelectenerg-7534	682	37	on	on	ADP
fuelectenerg-7534	682	38	phased	phased	ADJ
fuelectenerg-7534	682	39	array	array	NOUN
fuelectenerg-7534	682	40	systems	system	NOUN
fuelectenerg-7534	682	41	and	and	CCONJ
fuelectenerg-7534	682	42	technology	technology	NOUN
fuelectenerg-7534	682	43	,	,	PUNCT
fuelectenerg-7534	682	44	2010	2010	NUM
fuelectenerg-7534	682	45	,	,	PUNCT
fuelectenerg-7534	682	46	pp	pp	ADP
fuelectenerg-7534	682	47	.	.	PUNCT
fuelectenerg-7534	683	1	219–224	219–224	NUM
fuelectenerg-7534	683	2	.	.	PUNCT
fuelectenerg-7534	684	1	[	[	X
fuelectenerg-7534	684	2	67	67	NUM
fuelectenerg-7534	684	3	]	]	X
fuelectenerg-7534	684	4	r.	r.	PROPN
fuelectenerg-7534	684	5	malmqvist	malmqvist	PROPN
fuelectenerg-7534	684	6	,	,	PUNCT
fuelectenerg-7534	684	7	c.	c.	PROPN
fuelectenerg-7534	684	8	samuelsson	samuelsson	PROPN
fuelectenerg-7534	684	9	,	,	PUNCT
fuelectenerg-7534	684	10	b.	b.	PROPN
fuelectenerg-7534	684	11	carlegrim	carlegrim	PROPN
fuelectenerg-7534	684	12	,	,	PUNCT
fuelectenerg-7534	684	13	p.	p.	NOUN
fuelectenerg-7534	684	14	rantakari	rantakari	NOUN
fuelectenerg-7534	684	15	,	,	PUNCT
fuelectenerg-7534	684	16	t.	t.	NOUN
fuelectenerg-7534	684	17	vaha	vaha	NOUN
fuelectenerg-7534	684	18	-	-	PUNCT
fuelectenerg-7534	684	19	heikkilla	heikkilla	NOUN
fuelectenerg-7534	684	20	,	,	PUNCT
fuelectenerg-7534	684	21	a.	a.	NOUN
fuelectenerg-7534	684	22	rydberg	rydberg	PROPN
fuelectenerg-7534	684	23	,	,	PUNCT
fuelectenerg-7534	684	24	and	and	CCONJ
fuelectenerg-7534	684	25	j.	j.	PROPN
fuelectenerg-7534	684	26	varis	varis	PROPN
fuelectenerg-7534	684	27	,	,	PUNCT
fuelectenerg-7534	684	28	“	"	PUNCT
fuelectenerg-7534	684	29	ka	ka	ADJ
fuelectenerg-7534	684	30	-	-	PUNCT
fuelectenerg-7534	684	31	band	band	NOUN
fuelectenerg-7534	684	32	rf	rf	NOUN
fuelectenerg-7534	684	33	mems	mem	NOUN
fuelectenerg-7534	684	34	phase	phase	NOUN
fuelectenerg-7534	684	35	shifters	shifter	NOUN
fuelectenerg-7534	684	36	for	for	ADP
fuelectenerg-7534	684	37	energy	energy	NOUN
fuelectenerg-7534	684	38	starved	starve	VERB
fuelectenerg-7534	684	39	millimetre	millimetre	NOUN
fuelectenerg-7534	684	40	-	-	PUNCT
fuelectenerg-7534	684	41	wave	wave	NOUN
fuelectenerg-7534	684	42	radar	radar	NOUN
fuelectenerg-7534	684	43	sensors	sensor	NOUN
fuelectenerg-7534	684	44	”	"	PUNCT
fuelectenerg-7534	684	45	,	,	PUNCT
fuelectenerg-7534	684	46	in	in	ADP
fuelectenerg-7534	684	47	proceedings	proceeding	NOUN
fuelectenerg-7534	684	48	of	of	ADP
fuelectenerg-7534	684	49	the	the	DET
fuelectenerg-7534	684	50	cas	cas	PROPN
fuelectenerg-7534	684	51	(	(	PUNCT
fuelectenerg-7534	684	52	international	international	ADJ
fuelectenerg-7534	684	53	semiconductor	semiconductor	NOUN
fuelectenerg-7534	684	54	conference	conference	NOUN
fuelectenerg-7534	684	55	)	)	PUNCT
fuelectenerg-7534	684	56	,	,	PUNCT
fuelectenerg-7534	684	57	2010	2010	NUM
fuelectenerg-7534	684	58	,	,	PUNCT
fuelectenerg-7534	684	59	vol	vol	NOUN
fuelectenerg-7534	684	60	.	.	PROPN
fuelectenerg-7534	684	61	1	1	NUM
fuelectenerg-7534	684	62	,	,	PUNCT
fuelectenerg-7534	684	63	pp	pp	ADJ
fuelectenerg-7534	684	64	.	.	PUNCT
fuelectenerg-7534	685	1	261–264	261–264	NUM
fuelectenerg-7534	685	2	.	.	PUNCT
fuelectenerg-7534	686	1	[	[	X
fuelectenerg-7534	686	2	68	68	NUM
fuelectenerg-7534	686	3	]	]	PUNCT
fuelectenerg-7534	686	4	t.	t.	PROPN
fuelectenerg-7534	686	5	watanabe	watanabe	PROPN
fuelectenerg-7534	686	6	,	,	PUNCT
fuelectenerg-7534	686	7	r.	r.	PROPN
fuelectenerg-7534	686	8	yamazaki	yamazaki	PROPN
fuelectenerg-7534	686	9	,	,	PUNCT
fuelectenerg-7534	686	10	t.	t.	PROPN
fuelectenerg-7534	686	11	furutsuka	furutsuka	PROPN
fuelectenerg-7534	686	12	,	,	PUNCT
fuelectenerg-7534	686	13	s.	s.	PROPN
fuelectenerg-7534	686	14	tanaka	tanaka	PROPN
fuelectenerg-7534	686	15	,	,	PUNCT
fuelectenerg-7534	686	16	and	and	CCONJ
fuelectenerg-7534	686	17	k.	k.	PROPN
fuelectenerg-7534	686	18	suzuki	suzuki	PROPN
fuelectenerg-7534	686	19	,	,	PUNCT
fuelectenerg-7534	686	20	“	"	PUNCT
fuelectenerg-7534	686	21	a	a	DET
fuelectenerg-7534	686	22	quasi	quasi	ADJ
fuelectenerg-7534	686	23	-	-	ADJ
fuelectenerg-7534	686	24	millimeter	millimeter	ADJ
fuelectenerg-7534	686	25	wave	wave	NOUN
fuelectenerg-7534	686	26	band	band	NOUN
fuelectenerg-7534	686	27	phase	phase	NOUN
fuelectenerg-7534	686	28	shifter	shifter	NOUN
fuelectenerg-7534	686	29	with	with	ADP
fuelectenerg-7534	686	30	mems	mem	NOUN
fuelectenerg-7534	686	31	shunt	shunt	NOUN
fuelectenerg-7534	686	32	switches	switch	NOUN
fuelectenerg-7534	686	33	”	"	PUNCT
fuelectenerg-7534	686	34	in	in	ADP
fuelectenerg-7534	686	35	proceedings	proceeding	NOUN
fuelectenerg-7534	686	36	of	of	ADP
fuelectenerg-7534	686	37	the	the	DET
fuelectenerg-7534	686	38	asia	asia	PROPN
fuelectenerg-7534	686	39	-	-	PUNCT
fuelectenerg-7534	686	40	pacic	pacic	NOUN
fuelectenerg-7534	686	41	microwave	microwave	NOUN
fuelectenerg-7534	686	42	conference	conference	NOUN
fuelectenerg-7534	686	43	,	,	PUNCT
fuelectenerg-7534	686	44	2014	2014	NUM
fuelectenerg-7534	686	45	,	,	PUNCT
fuelectenerg-7534	686	46	pp	pp	ADV
fuelectenerg-7534	686	47	.	.	PUNCT
fuelectenerg-7534	686	48	64–66	64–66	NUM
fuelectenerg-7534	686	49	.	.	X
fuelectenerg-7534	686	50	364	364	NUM
fuelectenerg-7534	686	51	g.	g.	NOUN
fuelectenerg-7534	686	52	tagliapietra	tagliapietra	PROPN
fuelectenerg-7534	686	53	,	,	PUNCT
fuelectenerg-7534	686	54	j.	j.	PROPN
fuelectenerg-7534	686	55	iannacci	iannacci	PROPN
fuelectenerg-7534	687	1	[	[	X
fuelectenerg-7534	687	2	69	69	NUM
fuelectenerg-7534	687	3	]	]	X
fuelectenerg-7534	687	4	y.	y.	PROPN
fuelectenerg-7534	687	5	huang	huang	PROPN
fuelectenerg-7534	687	6	,	,	PUNCT
fuelectenerg-7534	687	7	j.	j.	PROPN
fuelectenerg-7534	687	8	bao	bao	PROPN
fuelectenerg-7534	687	9	,	,	PUNCT
fuelectenerg-7534	687	10	x.	x.	PROPN
fuelectenerg-7534	687	11	li	li	PROPN
fuelectenerg-7534	687	12	,	,	PUNCT
fuelectenerg-7534	687	13	y.	y.	PROPN
fuelectenerg-7534	687	14	wang	wang	PROPN
fuelectenerg-7534	687	15	,	,	PUNCT
fuelectenerg-7534	687	16	and	and	CCONJ
fuelectenerg-7534	687	17	y.	y.	PROPN
fuelectenerg-7534	687	18	du	du	PROPN
fuelectenerg-7534	687	19	,	,	PUNCT
fuelectenerg-7534	687	20	“	"	PUNCT
fuelectenerg-7534	687	21	a	a	DET
fuelectenerg-7534	687	22	4	4	NUM
fuelectenerg-7534	687	23	-	-	PUNCT
fuelectenerg-7534	687	24	bit	bit	NOUN
fuelectenerg-7534	687	25	switched	switch	VERB
fuelectenerg-7534	687	26	-	-	PUNCT
fuelectenerg-7534	687	27	line	line	NOUN
fuelectenerg-7534	687	28	phase	phase	NOUN
fuelectenerg-7534	687	29	shifter	shifter	NOUN
fuelectenerg-7534	687	30	based	base	VERB
fuelectenerg-7534	687	31	on	on	ADP
fuelectenerg-7534	687	32	mems	mems	ADJ
fuelectenerg-7534	687	33	switches	switch	NOUN
fuelectenerg-7534	687	34	”	"	PUNCT
fuelectenerg-7534	687	35	in	in	ADP
fuelectenerg-7534	687	36	proceedings	proceeding	NOUN
fuelectenerg-7534	687	37	of	of	ADP
fuelectenerg-7534	687	38	the	the	DET
fuelectenerg-7534	687	39	10th	10th	ADJ
fuelectenerg-7534	687	40	ieee	ieee	NOUN
fuelectenerg-7534	687	41	international	international	ADJ
fuelectenerg-7534	687	42	conference	conference	NOUN
fuelectenerg-7534	687	43	on	on	ADP
fuelectenerg-7534	687	44	nano	nano	NOUN
fuelectenerg-7534	687	45	/	/	SYM
fuelectenerg-7534	687	46	micro	micro	ADJ
fuelectenerg-7534	687	47	engineered	engineer	VERB
fuelectenerg-7534	687	48	and	and	CCONJ
fuelectenerg-7534	687	49	molecular	molecular	ADJ
fuelectenerg-7534	687	50	systems	system	NOUN
fuelectenerg-7534	687	51	,	,	PUNCT
fuelectenerg-7534	687	52	2015	2015	NUM
fuelectenerg-7534	687	53	,	,	PUNCT
fuelectenerg-7534	687	54	pp	pp	ADJ
fuelectenerg-7534	687	55	.	.	PUNCT
fuelectenerg-7534	688	1	405–408	405–408	NUM
fuelectenerg-7534	688	2	.	.	PUNCT
fuelectenerg-7534	689	1	[	[	X
fuelectenerg-7534	689	2	70	70	NUM
fuelectenerg-7534	689	3	]	]	X
fuelectenerg-7534	689	4	s.	s.	PROPN
fuelectenerg-7534	689	5	dey	dey	PROPN
fuelectenerg-7534	689	6	and	and	CCONJ
fuelectenerg-7534	689	7	s.	s.	PROPN
fuelectenerg-7534	689	8	k.	k.	PROPN
fuelectenerg-7534	689	9	koul	koul	PROPN
fuelectenerg-7534	689	10	,	,	PUNCT
fuelectenerg-7534	689	11	“	"	PUNCT
fuelectenerg-7534	689	12	reliability	reliability	NOUN
fuelectenerg-7534	689	13	analysis	analysis	NOUN
fuelectenerg-7534	689	14	of	of	ADP
fuelectenerg-7534	689	15	ku	ku	PROPN
fuelectenerg-7534	689	16	-	-	PUNCT
fuelectenerg-7534	689	17	band	band	NOUN
fuelectenerg-7534	689	18	5	5	NUM
fuelectenerg-7534	689	19	-	-	PUNCT
fuelectenerg-7534	689	20	bit	bit	NOUN
fuelectenerg-7534	689	21	phase	phase	NOUN
fuelectenerg-7534	689	22	shifters	shifter	NOUN
fuelectenerg-7534	689	23	using	use	VERB
fuelectenerg-7534	689	24	mems	mem	NOUN
fuelectenerg-7534	689	25	sp4	sp4	PROPN
fuelectenerg-7534	689	26	t	t	PROPN
fuelectenerg-7534	689	27	and	and	CCONJ
fuelectenerg-7534	689	28	spdt	spdt	PROPN
fuelectenerg-7534	689	29	switches	switch	NOUN
fuelectenerg-7534	689	30	”	"	PUNCT
fuelectenerg-7534	689	31	,	,	PUNCT
fuelectenerg-7534	689	32	ieee	ieee	NOUN
fuelectenerg-7534	689	33	transactions	transaction	NOUN
fuelectenerg-7534	689	34	on	on	ADP
fuelectenerg-7534	689	35	microwave	microwave	NOUN
fuelectenerg-7534	689	36	theory	theory	NOUN
fuelectenerg-7534	689	37	and	and	CCONJ
fuelectenerg-7534	689	38	techniques	technique	NOUN
fuelectenerg-7534	689	39	,	,	PUNCT
fuelectenerg-7534	689	40	vol	vol	NOUN
fuelectenerg-7534	689	41	.	.	PROPN
fuelectenerg-7534	689	42	63	63	NUM
fuelectenerg-7534	689	43	,	,	PUNCT
fuelectenerg-7534	689	44	no	no	INTJ
fuelectenerg-7534	689	45	.	.	NOUN
fuelectenerg-7534	689	46	12	12	NUM
fuelectenerg-7534	689	47	,	,	PUNCT
fuelectenerg-7534	689	48	pp	pp	ADJ
fuelectenerg-7534	689	49	.	.	PUNCT
fuelectenerg-7534	689	50	3997	3997	NUM
fuelectenerg-7534	689	51	-	-	SYM
fuelectenerg-7534	689	52	4012	4012	NUM
fuelectenerg-7534	689	53	,	,	PUNCT
fuelectenerg-7534	689	54	2015	2015	NUM
fuelectenerg-7534	689	55	.	.	PUNCT
fuelectenerg-7534	690	1	[	[	X
fuelectenerg-7534	690	2	71	71	NUM
fuelectenerg-7534	690	3	]	]	X
fuelectenerg-7534	690	4	s.	s.	PROPN
fuelectenerg-7534	690	5	koul	koul	PROPN
fuelectenerg-7534	690	6	,	,	PUNCT
fuelectenerg-7534	690	7	s.	s.	PROPN
fuelectenerg-7534	690	8	dey	dey	PROPN
fuelectenerg-7534	690	9	,	,	PUNCT
fuelectenerg-7534	690	10	a.	a.	NOUN
fuelectenerg-7534	690	11	poddar	poddar	NOUN
fuelectenerg-7534	690	12	,	,	PUNCT
fuelectenerg-7534	690	13	and	and	CCONJ
fuelectenerg-7534	690	14	u.	u.	PROPN
fuelectenerg-7534	690	15	rohde	rohde	PROPN
fuelectenerg-7534	690	16	,	,	PUNCT
fuelectenerg-7534	690	17	“	"	PUNCT
fuelectenerg-7534	690	18	ka	ka	ADJ
fuelectenerg-7534	690	19	-	-	PUNCT
fuelectenerg-7534	690	20	band	band	NOUN
fuelectenerg-7534	690	21	reliable	reliable	ADJ
fuelectenerg-7534	690	22	and	and	CCONJ
fuelectenerg-7534	690	23	compact	compact	ADJ
fuelectenerg-7534	690	24	3	3	NUM
fuelectenerg-7534	690	25	-	-	PUNCT
fuelectenerg-7534	690	26	bit	bit	NOUN
fuelectenerg-7534	690	27	true	true	ADJ
fuelectenerg-7534	690	28	-	-	PUNCT
fuelectenerg-7534	690	29	time	time	NOUN
fuelectenerg-7534	690	30	-	-	PUNCT
fuelectenerg-7534	690	31	delay	delay	NOUN
fuelectenerg-7534	690	32	phase	phase	NOUN
fuelectenerg-7534	690	33	shifter	shifter	NOUN
fuelectenerg-7534	690	34	using	use	VERB
fuelectenerg-7534	690	35	mems	mem	NOUN
fuelectenerg-7534	690	36	single	single	ADJ
fuelectenerg-7534	690	37	-	-	PUNCT
fuelectenerg-7534	690	38	pole	pole	NOUN
fuelectenerg-7534	690	39	-	-	PUNCT
fuelectenerg-7534	690	40	eight	eight	NUM
fuelectenerg-7534	690	41	-	-	PUNCT
fuelectenerg-7534	690	42	throw	throw	NOUN
fuelectenerg-7534	690	43	switching	switch	VERB
fuelectenerg-7534	690	44	networks	network	NOUN
fuelectenerg-7534	690	45	”	"	PUNCT
fuelectenerg-7534	690	46	,	,	PUNCT
fuelectenerg-7534	690	47	journal	journal	NOUN
fuelectenerg-7534	690	48	of	of	ADP
fuelectenerg-7534	690	49	micromechanics	micromechanic	NOUN
fuelectenerg-7534	690	50	and	and	CCONJ
fuelectenerg-7534	690	51	microengineering	microengineering	NOUN
fuelectenerg-7534	690	52	,	,	PUNCT
fuelectenerg-7534	690	53	vol	vol	NOUN
fuelectenerg-7534	690	54	.	.	PROPN
fuelectenerg-7534	690	55	26	26	NUM
fuelectenerg-7534	690	56	,	,	PUNCT
fuelectenerg-7534	690	57	08	08	NUM
fuelectenerg-7534	690	58	2016	2016	NUM
fuelectenerg-7534	690	59	.	.	PUNCT
fuelectenerg-7534	691	1	[	[	X
fuelectenerg-7534	691	2	72	72	NUM
fuelectenerg-7534	691	3	]	]	PUNCT
fuelectenerg-7534	691	4	s.	s.	PROPN
fuelectenerg-7534	691	5	k.	k.	PROPN
fuelectenerg-7534	691	6	koul	koul	PROPN
fuelectenerg-7534	691	7	,	,	PUNCT
fuelectenerg-7534	691	8	s.	s.	PROPN
fuelectenerg-7534	691	9	dey	dey	PROPN
fuelectenerg-7534	691	10	,	,	PUNCT
fuelectenerg-7534	691	11	a.	a.	PROPN
fuelectenerg-7534	691	12	k.	k.	PROPN
fuelectenerg-7534	691	13	poddar	poddar	PROPN
fuelectenerg-7534	691	14	,	,	PUNCT
fuelectenerg-7534	691	15	and	and	CCONJ
fuelectenerg-7534	691	16	u.	u.	PROPN
fuelectenerg-7534	691	17	l.	l.	PROPN
fuelectenerg-7534	691	18	rohde	rohde	PROPN
fuelectenerg-7534	691	19	,	,	PUNCT
fuelectenerg-7534	691	20	“	"	PUNCT
fuelectenerg-7534	691	21	micromachined	micromachine	VERB
fuelectenerg-7534	691	22	switches	switch	NOUN
fuelectenerg-7534	691	23	and	and	CCONJ
fuelectenerg-7534	691	24	phase	phase	NOUN
fuelectenerg-7534	691	25	shifters	shifter	NOUN
fuelectenerg-7534	691	26	for	for	ADP
fuelectenerg-7534	691	27	transmit	transmit	NOUN
fuelectenerg-7534	691	28	/	/	SYM
fuelectenerg-7534	691	29	receive	receive	NOUN
fuelectenerg-7534	691	30	module	module	NOUN
fuelectenerg-7534	691	31	applications	application	NOUN
fuelectenerg-7534	691	32	”	"	PUNCT
fuelectenerg-7534	691	33	,	,	PUNCT
fuelectenerg-7534	691	34	in	in	ADP
fuelectenerg-7534	691	35	proceedings	proceeding	NOUN
fuelectenerg-7534	691	36	of	of	ADP
fuelectenerg-7534	691	37	the	the	DET
fuelectenerg-7534	691	38	46th	46th	ADJ
fuelectenerg-7534	691	39	european	european	PROPN
fuelectenerg-7534	691	40	microwave	microwave	PROPN
fuelectenerg-7534	691	41	conference	conference	PROPN
fuelectenerg-7534	691	42	(	(	PUNCT
fuelectenerg-7534	691	43	eumc	eumc	PROPN
fuelectenerg-7534	691	44	)	)	PUNCT
fuelectenerg-7534	691	45	,	,	PUNCT
fuelectenerg-7534	691	46	2016	2016	NUM
fuelectenerg-7534	691	47	,	,	PUNCT
fuelectenerg-7534	691	48	pp	pp	ADJ
fuelectenerg-7534	691	49	.	.	PUNCT
fuelectenerg-7534	692	1	971–974	971–974	NUM
fuelectenerg-7534	692	2	.	.	PUNCT
fuelectenerg-7534	693	1	[	[	X
fuelectenerg-7534	693	2	73	73	NUM
fuelectenerg-7534	693	3	]	]	PUNCT
fuelectenerg-7534	693	4	j.	j.	PROPN
fuelectenerg-7534	693	5	iannacci	iannacci	PROPN
fuelectenerg-7534	693	6	,	,	PUNCT
fuelectenerg-7534	693	7	g.	g.	PROPN
fuelectenerg-7534	693	8	resta	resta	PROPN
fuelectenerg-7534	693	9	,	,	PUNCT
fuelectenerg-7534	693	10	a.	a.	NOUN
fuelectenerg-7534	693	11	bagolini	bagolini	PROPN
fuelectenerg-7534	693	12	,	,	PUNCT
fuelectenerg-7534	693	13	f.	f.	PROPN
fuelectenerg-7534	693	14	giacomozzi	giacomozzi	PROPN
fuelectenerg-7534	693	15	,	,	PUNCT
fuelectenerg-7534	693	16	e.	e.	PROPN
fuelectenerg-7534	693	17	bochkova	bochkova	PROPN
fuelectenerg-7534	693	18	,	,	PUNCT
fuelectenerg-7534	693	19	e.	e.	PROPN
fuelectenerg-7534	693	20	savin	savin	PROPN
fuelectenerg-7534	693	21	,	,	PUNCT
fuelectenerg-7534	693	22	r.	r.	PROPN
fuelectenerg-7534	693	23	kirtaev	kirtaev	PROPN
fuelectenerg-7534	693	24	,	,	PUNCT
fuelectenerg-7534	693	25	a.	a.	NOUN
fuelectenerg-7534	693	26	tsarkov	tsarkov	PROPN
fuelectenerg-7534	693	27	,	,	PUNCT
fuelectenerg-7534	693	28	and	and	CCONJ
fuelectenerg-7534	693	29	m.	m.	PROPN
fuelectenerg-7534	693	30	donelli	donelli	PROPN
fuelectenerg-7534	693	31	,	,	PUNCT
fuelectenerg-7534	693	32	“	"	PUNCT
fuelectenerg-7534	693	33	rf	rf	ADJ
fuelectenerg-7534	693	34	-	-	PUNCT
fuelectenerg-7534	693	35	mems	mems	ADJ
fuelectenerg-7534	693	36	monolithic	monolithic	ADJ
fuelectenerg-7534	693	37	k	k	PROPN
fuelectenerg-7534	693	38	and	and	CCONJ
fuelectenerg-7534	693	39	ka	ka	PROPN
fuelectenerg-7534	693	40	band	band	NOUN
fuelectenerg-7534	693	41	multistate	multistate	NOUN
fuelectenerg-7534	693	42	phase	phase	NOUN
fuelectenerg-7534	693	43	shifters	shifter	NOUN
fuelectenerg-7534	693	44	as	as	ADP
fuelectenerg-7534	693	45	building	build	VERB
fuelectenerg-7534	693	46	blocks	block	NOUN
fuelectenerg-7534	693	47	for	for	ADP
fuelectenerg-7534	693	48	5	5	NUM
fuelectenerg-7534	693	49	g	g	NOUN
fuelectenerg-7534	693	50	and	and	CCONJ
fuelectenerg-7534	693	51	internet	internet	NOUN
fuelectenerg-7534	693	52	of	of	ADP
fuelectenerg-7534	693	53	things	thing	NOUN
fuelectenerg-7534	693	54	(	(	PUNCT
fuelectenerg-7534	693	55	iot	iot	NOUN
fuelectenerg-7534	693	56	)	)	PUNCT
fuelectenerg-7534	693	57	applications	application	NOUN
fuelectenerg-7534	693	58	”	"	PUNCT
fuelectenerg-7534	693	59	,	,	PUNCT
fuelectenerg-7534	693	60	sensors	sensor	NOUN
fuelectenerg-7534	693	61	,	,	PUNCT
fuelectenerg-7534	693	62	vol	vol	NOUN
fuelectenerg-7534	693	63	.	.	PROPN
fuelectenerg-7534	693	64	20	20	NUM
fuelectenerg-7534	693	65	,	,	PUNCT
fuelectenerg-7534	693	66	no	no	INTJ
fuelectenerg-7534	693	67	.	.	NOUN
fuelectenerg-7534	693	68	13	13	NUM
fuelectenerg-7534	693	69	,	,	PUNCT
fuelectenerg-7534	693	70	05	05	NUM
fuelectenerg-7534	693	71	,	,	PUNCT
fuelectenerg-7534	693	72	2020	2020	NUM
fuelectenerg-7534	693	73	.	.	PUNCT
fuelectenerg-7534	694	1	[	[	X
fuelectenerg-7534	694	2	74	74	NUM
fuelectenerg-7534	694	3	]	]	PUNCT
fuelectenerg-7534	694	4	j.	j.	PROPN
fuelectenerg-7534	694	5	reinke	reinke	PROPN
fuelectenerg-7534	694	6	,	,	PUNCT
fuelectenerg-7534	694	7	l.wang	l.wang	PROPN
fuelectenerg-7534	694	8	,	,	PUNCT
fuelectenerg-7534	694	9	g.	g.	PROPN
fuelectenerg-7534	694	10	k.	k.	PROPN
fuelectenerg-7534	694	11	fedder	fedder	PROPN
fuelectenerg-7534	694	12	,	,	PUNCT
fuelectenerg-7534	694	13	and	and	CCONJ
fuelectenerg-7534	694	14	t.	t.	PROPN
fuelectenerg-7534	694	15	mukherjee	mukherjee	PROPN
fuelectenerg-7534	694	16	,	,	PUNCT
fuelectenerg-7534	694	17	“	"	PUNCT
fuelectenerg-7534	694	18	a	a	DET
fuelectenerg-7534	694	19	4	4	NUM
fuelectenerg-7534	694	20	-	-	PUNCT
fuelectenerg-7534	694	21	bit	bit	NOUN
fuelectenerg-7534	694	22	rf	rf	ADJ
fuelectenerg-7534	694	23	mems	mem	NOUN
fuelectenerg-7534	694	24	phase	phase	NOUN
fuelectenerg-7534	694	25	shifter	shifter	NOUN
fuelectenerg-7534	694	26	monolithically	monolithically	ADV
fuelectenerg-7534	694	27	integrated	integrate	VERB
fuelectenerg-7534	694	28	with	with	ADP
fuelectenerg-7534	694	29	conventional	conventional	ADJ
fuelectenerg-7534	694	30	cmos	cmos	NOUN
fuelectenerg-7534	694	31	”	"	PUNCT
fuelectenerg-7534	694	32	,	,	PUNCT
fuelectenerg-7534	694	33	in	in	ADP
fuelectenerg-7534	694	34	proceedings	proceeding	NOUN
fuelectenerg-7534	694	35	of	of	ADP
fuelectenerg-7534	694	36	the	the	DET
fuelectenerg-7534	694	37	ieee	ieee	NOUN
fuelectenerg-7534	694	38	24th	24th	NOUN
fuelectenerg-7534	694	39	international	international	ADJ
fuelectenerg-7534	694	40	conference	conference	NOUN
fuelectenerg-7534	694	41	on	on	ADP
fuelectenerg-7534	694	42	micro	micro	ADJ
fuelectenerg-7534	694	43	electromechanical	electromechanical	ADJ
fuelectenerg-7534	694	44	systems	system	NOUN
fuelectenerg-7534	694	45	,	,	PUNCT
fuelectenerg-7534	694	46	2011	2011	NUM
fuelectenerg-7534	694	47	,	,	PUNCT
fuelectenerg-7534	694	48	pp	pp	ADV
fuelectenerg-7534	694	49	.	.	PUNCT
fuelectenerg-7534	695	1	748–751	748–751	NUM
fuelectenerg-7534	695	2	.	.	PUNCT
fuelectenerg-7534	696	1	[	[	X
fuelectenerg-7534	696	2	75	75	NUM
fuelectenerg-7534	696	3	]	]	X
fuelectenerg-7534	696	4	y.	y.	PROPN
fuelectenerg-7534	696	5	lin	lin	PROPN
fuelectenerg-7534	696	6	,	,	PUNCT
fuelectenerg-7534	696	7	y.	y.	PROPN
fuelectenerg-7534	696	8	chou	chou	PROPN
fuelectenerg-7534	696	9	,	,	PUNCT
fuelectenerg-7534	696	10	and	and	CCONJ
fuelectenerg-7534	696	11	c.	c.	PROPN
fuelectenerg-7534	696	12	chang	chang	PROPN
fuelectenerg-7534	696	13	,	,	PUNCT
fuelectenerg-7534	696	14	“	"	PUNCT
fuelectenerg-7534	696	15	a	a	DET
fuelectenerg-7534	696	16	balanced	balanced	ADJ
fuelectenerg-7534	696	17	digital	digital	ADJ
fuelectenerg-7534	696	18	phase	phase	NOUN
fuelectenerg-7534	696	19	shifter	shifter	NOUN
fuelectenerg-7534	696	20	by	by	ADP
fuelectenerg-7534	696	21	a	a	DET
fuelectenerg-7534	696	22	novel	novel	ADJ
fuelectenerg-7534	696	23	switching	switching	NOUN
fuelectenerg-7534	696	24	-	-	PUNCT
fuelectenerg-7534	696	25	mode	mode	NOUN
fuelectenerg-7534	696	26	topology	topology	NOUN
fuelectenerg-7534	696	27	”	"	PUNCT
fuelectenerg-7534	696	28	,	,	PUNCT
fuelectenerg-7534	696	29	ieee	ieee	NOUN
fuelectenerg-7534	696	30	transactions	transaction	NOUN
fuelectenerg-7534	696	31	on	on	ADP
fuelectenerg-7534	696	32	microwave	microwave	NOUN
fuelectenerg-7534	696	33	theory	theory	NOUN
fuelectenerg-7534	696	34	and	and	CCONJ
fuelectenerg-7534	696	35	techniques	technique	NOUN
fuelectenerg-7534	696	36	,	,	PUNCT
fuelectenerg-7534	696	37	vol	vol	NOUN
fuelectenerg-7534	696	38	.	.	PROPN
fuelectenerg-7534	696	39	61	61	NUM
fuelectenerg-7534	696	40	,	,	PUNCT
fuelectenerg-7534	696	41	no	no	INTJ
fuelectenerg-7534	696	42	.	.	NOUN
fuelectenerg-7534	696	43	6	6	NUM
fuelectenerg-7534	696	44	,	,	PUNCT
fuelectenerg-7534	696	45	2361–2370	2361–2370	NUM
fuelectenerg-7534	696	46	,	,	PUNCT
fuelectenerg-7534	696	47	2013	2013	NUM
fuelectenerg-7534	696	48	.	.	PUNCT
fuelectenerg-7534	697	1	[	[	X
fuelectenerg-7534	697	2	76	76	NUM
fuelectenerg-7534	697	3	]	]	X
fuelectenerg-7534	697	4	m.	m.	NOUN
fuelectenerg-7534	697	5	bakri	bakri	PROPN
fuelectenerg-7534	697	6	-	-	PUNCT
fuelectenerg-7534	697	7	kassem	kassem	PROPN
fuelectenerg-7534	697	8	and	and	CCONJ
fuelectenerg-7534	697	9	r.	r.	PROPN
fuelectenerg-7534	697	10	r.	r.	PROPN
fuelectenerg-7534	697	11	mansour	mansour	PROPN
fuelectenerg-7534	697	12	,	,	PUNCT
fuelectenerg-7534	697	13	“	"	PUNCT
fuelectenerg-7534	697	14	a	a	DET
fuelectenerg-7534	697	15	novel	novel	ADJ
fuelectenerg-7534	697	16	self	self	NOUN
fuelectenerg-7534	697	17	collapsed	collapse	VERB
fuelectenerg-7534	697	18	corrugated	corrugate	VERB
fuelectenerg-7534	697	19	mems	mem	NOUN
fuelectenerg-7534	697	20	phase	phase	NOUN
fuelectenerg-7534	697	21	shifter	shifter	NOUN
fuelectenerg-7534	697	22	”	"	PUNCT
fuelectenerg-7534	697	23	,	,	PUNCT
fuelectenerg-7534	697	24	in	in	ADP
fuelectenerg-7534	697	25	proceedings	proceeding	NOUN
fuelectenerg-7534	697	26	of	of	ADP
fuelectenerg-7534	697	27	the	the	DET
fuelectenerg-7534	697	28	2013	2013	NUM
fuelectenerg-7534	697	29	european	european	ADJ
fuelectenerg-7534	697	30	microwave	microwave	PROPN
fuelectenerg-7534	697	31	integrated	integrate	VERB
fuelectenerg-7534	697	32	circuit	circuit	NOUN
fuelectenerg-7534	697	33	conference	conference	NOUN
fuelectenerg-7534	697	34	,	,	PUNCT
fuelectenerg-7534	697	35	2013	2013	NUM
fuelectenerg-7534	697	36	,	,	PUNCT
fuelectenerg-7534	697	37	pp	pp	ADJ
fuelectenerg-7534	697	38	.	.	PUNCT
fuelectenerg-7534	698	1	360–363	360–363	NUM
fuelectenerg-7534	698	2	.	.	PUNCT
fuelectenerg-7534	699	1	[	[	X
fuelectenerg-7534	699	2	77	77	NUM
fuelectenerg-7534	699	3	]	]	X
fuelectenerg-7534	699	4	a.	a.	PROPN
fuelectenerg-7534	699	5	razeghi	razeghi	PROPN
fuelectenerg-7534	699	6	and	and	CCONJ
fuelectenerg-7534	699	7	b.	b.	PROPN
fuelectenerg-7534	699	8	a.	a.	PROPN
fuelectenerg-7534	699	9	ganji	ganji	PROPN
fuelectenerg-7534	699	10	,	,	PUNCT
fuelectenerg-7534	699	11	“	"	PUNCT
fuelectenerg-7534	699	12	an	an	DET
fuelectenerg-7534	699	13	improved	improved	ADJ
fuelectenerg-7534	699	14	switched	switch	VERB
fuelectenerg-7534	699	15	-	-	PUNCT
fuelectenerg-7534	699	16	line	line	NOUN
fuelectenerg-7534	699	17	phase	phase	NOUN
fuelectenerg-7534	699	18	shifter	shifter	NOUN
fuelectenerg-7534	699	19	using	use	VERB
fuelectenerg-7534	699	20	distributed	distribute	VERB
fuelectenerg-7534	699	21	mems	mem	NOUN
fuelectenerg-7534	699	22	transmission	transmission	NOUN
fuelectenerg-7534	699	23	line	line	NOUN
fuelectenerg-7534	699	24	”	"	PUNCT
fuelectenerg-7534	699	25	,	,	PUNCT
fuelectenerg-7534	699	26	majlesi	majlesi	NOUN
fuelectenerg-7534	699	27	journal	journal	PROPN
fuelectenerg-7534	699	28	of	of	ADP
fuelectenerg-7534	699	29	telecommunication	telecommunication	NOUN
fuelectenerg-7534	699	30	devices	device	NOUN
fuelectenerg-7534	699	31	,	,	PUNCT
fuelectenerg-7534	699	32	vol	vol	NOUN
fuelectenerg-7534	699	33	.	.	PROPN
fuelectenerg-7534	699	34	4	4	NUM
fuelectenerg-7534	699	35	,	,	PUNCT
fuelectenerg-7534	699	36	no	no	INTJ
fuelectenerg-7534	699	37	.	.	NOUN
fuelectenerg-7534	699	38	3	3	NUM
fuelectenerg-7534	699	39	,	,	PUNCT
fuelectenerg-7534	699	40	nov	nov	PROPN
fuelectenerg-7534	699	41	.	.	PROPN
fuelectenerg-7534	699	42	2015	2015	NUM
fuelectenerg-7534	699	43	.	.	PUNCT
fuelectenerg-7534	700	1	[	[	X
fuelectenerg-7534	700	2	78	78	NUM
fuelectenerg-7534	700	3	]	]	PUNCT
fuelectenerg-7534	700	4	a.	a.	NOUN
fuelectenerg-7534	700	5	chakraborty	chakraborty	PROPN
fuelectenerg-7534	700	6	and	and	CCONJ
fuelectenerg-7534	700	7	b.	b.	PROPN
fuelectenerg-7534	700	8	gupta	gupta	PROPN
fuelectenerg-7534	700	9	,	,	PUNCT
fuelectenerg-7534	700	10	“	"	PUNCT
fuelectenerg-7534	700	11	utility	utility	NOUN
fuelectenerg-7534	700	12	of	of	ADP
fuelectenerg-7534	700	13	rf	rf	NOUN
fuelectenerg-7534	700	14	mems	mem	NOUN
fuelectenerg-7534	700	15	miniature	miniature	NOUN
fuelectenerg-7534	700	16	switched	switch	VERB
fuelectenerg-7534	700	17	capacitors	capacitor	NOUN
fuelectenerg-7534	700	18	in	in	ADP
fuelectenerg-7534	700	19	phase	phase	NOUN
fuelectenerg-7534	700	20	shifting	shift	VERB
fuelectenerg-7534	700	21	applications	application	NOUN
fuelectenerg-7534	700	22	”	"	PUNCT
fuelectenerg-7534	700	23	,	,	PUNCT
fuelectenerg-7534	700	24	aeu	aeu	DET
fuelectenerg-7534	700	25	international	international	ADJ
fuelectenerg-7534	700	26	journal	journal	NOUN
fuelectenerg-7534	700	27	of	of	ADP
fuelectenerg-7534	700	28	electronics	electronic	NOUN
fuelectenerg-7534	700	29	and	and	CCONJ
fuelectenerg-7534	700	30	communications	communication	NOUN
fuelectenerg-7534	700	31	,	,	PUNCT
fuelectenerg-7534	700	32	vol	vol	NOUN
fuelectenerg-7534	700	33	.	.	PROPN
fuelectenerg-7534	701	1	75	75	NUM
fuelectenerg-7534	701	2	,	,	PUNCT
fuelectenerg-7534	701	3	03	03	NUM
fuelectenerg-7534	701	4	2017	2017	NUM
fuelectenerg-7534	701	5	.	.	PUNCT
fuelectenerg-7534	702	1	[	[	X
fuelectenerg-7534	702	2	79	79	NUM
fuelectenerg-7534	702	3	]	]	PUNCT
fuelectenerg-7534	702	4	s.	s.	PROPN
fuelectenerg-7534	702	5	afrang	afrang	PROPN
fuelectenerg-7534	702	6	,	,	PUNCT
fuelectenerg-7534	702	7	k.	k.	PROPN
fuelectenerg-7534	702	8	samandari	samandari	PROPN
fuelectenerg-7534	702	9	,	,	PUNCT
fuelectenerg-7534	702	10	and	and	CCONJ
fuelectenerg-7534	702	11	g.	g.	PROPN
fuelectenerg-7534	702	12	rezazadeh	rezazadeh	PROPN
fuelectenerg-7534	702	13	,	,	PUNCT
fuelectenerg-7534	702	14	“	"	PUNCT
fuelectenerg-7534	702	15	a	a	DET
fuelectenerg-7534	702	16	small	small	ADJ
fuelectenerg-7534	702	17	size	size	NOUN
fuelectenerg-7534	702	18	ka	ka	PROPN
fuelectenerg-7534	702	19	band	band	PROPN
fuelectenerg-7534	702	20	six	six	NUM
fuelectenerg-7534	702	21	-	-	PUNCT
fuelectenerg-7534	702	22	bit	bit	NOUN
fuelectenerg-7534	702	23	dmtl	dmtl	PROPN
fuelectenerg-7534	702	24	phase	phase	NOUN
fuelectenerg-7534	702	25	shifter	shifter	NOUN
fuelectenerg-7534	702	26	using	use	VERB
fuelectenerg-7534	702	27	new	new	ADJ
fuelectenerg-7534	702	28	design	design	NOUN
fuelectenerg-7534	702	29	of	of	ADP
fuelectenerg-7534	702	30	mems	mem	NOUN
fuelectenerg-7534	702	31	switch	switch	NOUN
fuelectenerg-7534	702	32	”	"	PUNCT
fuelectenerg-7534	702	33	,	,	PUNCT
fuelectenerg-7534	702	34	microsystem	microsystem	NOUN
fuelectenerg-7534	702	35	technologies	technology	NOUN
fuelectenerg-7534	702	36	,	,	PUNCT
fuelectenerg-7534	702	37	vol	vol	NOUN
fuelectenerg-7534	702	38	.	.	PROPN
fuelectenerg-7534	702	39	23	23	NUM
fuelectenerg-7534	702	40	,	,	PUNCT
fuelectenerg-7534	702	41	06	06	NUM
fuelectenerg-7534	702	42	2017	2017	NUM
fuelectenerg-7534	702	43	.	.	PUNCT
fuelectenerg-7534	703	1	[	[	X
fuelectenerg-7534	703	2	80	80	NUM
fuelectenerg-7534	703	3	]	]	X
fuelectenerg-7534	703	4	s.	s.	PROPN
fuelectenerg-7534	703	5	dey	dey	PROPN
fuelectenerg-7534	703	6	and	and	CCONJ
fuelectenerg-7534	703	7	s.	s.	PROPN
fuelectenerg-7534	703	8	koul	koul	PROPN
fuelectenerg-7534	703	9	,	,	PUNCT
fuelectenerg-7534	703	10	“	"	PUNCT
fuelectenerg-7534	703	11	design	design	NOUN
fuelectenerg-7534	703	12	,	,	PUNCT
fuelectenerg-7534	703	13	development	development	NOUN
fuelectenerg-7534	703	14	and	and	CCONJ
fuelectenerg-7534	703	15	characterization	characterization	NOUN
fuelectenerg-7534	703	16	of	of	ADP
fuelectenerg-7534	703	17	an	an	DET
fuelectenerg-7534	703	18	x	x	NOUN
fuelectenerg-7534	703	19	-	-	NOUN
fuelectenerg-7534	703	20	band	band	NOUN
fuelectenerg-7534	703	21	5	5	NUM
fuelectenerg-7534	703	22	bit	bit	NOUN
fuelectenerg-7534	703	23	dmtl	dmtl	NOUN
fuelectenerg-7534	703	24	phase	phase	NOUN
fuelectenerg-7534	703	25	shifter	shifter	NOUN
fuelectenerg-7534	703	26	using	use	VERB
fuelectenerg-7534	703	27	an	an	DET
fuelectenerg-7534	703	28	inline	inline	NOUN
fuelectenerg-7534	703	29	mems	mem	NOUN
fuelectenerg-7534	703	30	bridge	bridge	NOUN
fuelectenerg-7534	703	31	and	and	CCONJ
fuelectenerg-7534	703	32	mam	mam	PROPN
fuelectenerg-7534	703	33	capacitors	capacitor	NOUN
fuelectenerg-7534	703	34	”	"	PUNCT
fuelectenerg-7534	703	35	,	,	PUNCT
fuelectenerg-7534	703	36	journal	journal	NOUN
fuelectenerg-7534	703	37	of	of	ADP
fuelectenerg-7534	703	38	micromechanics	micromechanic	NOUN
fuelectenerg-7534	703	39	and	and	CCONJ
fuelectenerg-7534	703	40	microengineering	microengineering	NOUN
fuelectenerg-7534	703	41	,	,	PUNCT
fuelectenerg-7534	703	42	vol	vol	NOUN
fuelectenerg-7534	703	43	.	.	PROPN
fuelectenerg-7534	703	44	24	24	NUM
fuelectenerg-7534	703	45	,	,	PUNCT
fuelectenerg-7534	703	46	09	09	NUM
fuelectenerg-7534	703	47	2014	2014	NUM
fuelectenerg-7534	703	48	.	.	PUNCT
fuelectenerg-7534	704	1	[	[	X
fuelectenerg-7534	704	2	81	81	NUM
fuelectenerg-7534	704	3	]	]	PUNCT
fuelectenerg-7534	704	4	s.	s.	PROPN
fuelectenerg-7534	704	5	dey	dey	PROPN
fuelectenerg-7534	704	6	and	and	CCONJ
fuelectenerg-7534	704	7	s.	s.	PROPN
fuelectenerg-7534	704	8	koul	koul	PROPN
fuelectenerg-7534	704	9	,	,	PUNCT
fuelectenerg-7534	704	10	“	"	PUNCT
fuelectenerg-7534	704	11	10	10	NUM
fuelectenerg-7534	704	12	-	-	SYM
fuelectenerg-7534	704	13	25	25	NUM
fuelectenerg-7534	704	14	ghz	ghz	NOUN
fuelectenerg-7534	704	15	frequency	frequency	NOUN
fuelectenerg-7534	704	16	reconfigurable	reconfigurable	NOUN
fuelectenerg-7534	704	17	mems	mem	NOUN
fuelectenerg-7534	704	18	5	5	NUM
fuelectenerg-7534	704	19	-	-	PUNCT
fuelectenerg-7534	704	20	bit	bit	NOUN
fuelectenerg-7534	704	21	phase	phase	NOUN
fuelectenerg-7534	704	22	shifter	shifter	NOUN
fuelectenerg-7534	704	23	using	use	VERB
fuelectenerg-7534	704	24	push	push	NOUN
fuelectenerg-7534	704	25	-	-	PUNCT
fuelectenerg-7534	704	26	pull	pull	NOUN
fuelectenerg-7534	704	27	actuator	actuator	NOUN
fuelectenerg-7534	704	28	based	base	VERB
fuelectenerg-7534	704	29	toggle	toggle	NOUN
fuelectenerg-7534	704	30	mechanism	mechanism	NOUN
fuelectenerg-7534	704	31	”	"	PUNCT
fuelectenerg-7534	704	32	,	,	PUNCT
fuelectenerg-7534	704	33	journal	journal	NOUN
fuelectenerg-7534	704	34	of	of	ADP
fuelectenerg-7534	704	35	micromechanics	micromechanic	NOUN
fuelectenerg-7534	704	36	and	and	CCONJ
fuelectenerg-7534	704	37	microengineering	microengineering	NOUN
fuelectenerg-7534	704	38	,	,	PUNCT
fuelectenerg-7534	704	39	vol	vol	NOUN
fuelectenerg-7534	704	40	.	.	PROPN
fuelectenerg-7534	704	41	25	25	NUM
fuelectenerg-7534	704	42	,	,	PUNCT
fuelectenerg-7534	704	43	2015	2015	NUM
fuelectenerg-7534	704	44	.	.	PUNCT
fuelectenerg-7534	705	1	[	[	X
fuelectenerg-7534	705	2	82	82	NUM
fuelectenerg-7534	705	3	]	]	X
fuelectenerg-7534	705	4	s.	s.	PROPN
fuelectenerg-7534	705	5	dey	dey	PROPN
fuelectenerg-7534	705	6	,	,	PUNCT
fuelectenerg-7534	705	7	s.	s.	PROPN
fuelectenerg-7534	705	8	koul	koul	PROPN
fuelectenerg-7534	705	9	,	,	PUNCT
fuelectenerg-7534	705	10	a.	a.	NOUN
fuelectenerg-7534	705	11	poddar	poddar	PROPN
fuelectenerg-7534	705	12	,	,	PUNCT
fuelectenerg-7534	705	13	and	and	CCONJ
fuelectenerg-7534	705	14	u.	u.	PROPN
fuelectenerg-7534	705	15	rohde	rohde	PROPN
fuelectenerg-7534	705	16	,	,	PUNCT
fuelectenerg-7534	705	17	“	"	PUNCT
fuelectenerg-7534	705	18	ku	ku	PROPN
fuelectenerg-7534	705	19	to	to	ADP
fuelectenerg-7534	705	20	v	v	NOUN
fuelectenerg-7534	705	21	-	-	PUNCT
fuelectenerg-7534	705	22	band	band	NOUN
fuelectenerg-7534	705	23	4	4	NUM
fuelectenerg-7534	705	24	-	-	PUNCT
fuelectenerg-7534	705	25	bit	bit	NOUN
fuelectenerg-7534	705	26	mems	mem	NOUN
fuelectenerg-7534	705	27	phase	phase	NOUN
fuelectenerg-7534	705	28	shifter	shifter	NOUN
fuelectenerg-7534	705	29	bank	bank	NOUN
fuelectenerg-7534	705	30	using	use	VERB
fuelectenerg-7534	705	31	high	high	ADJ
fuelectenerg-7534	705	32	isolation	isolation	NOUN
fuelectenerg-7534	705	33	sp4	sp4	NOUN
fuelectenerg-7534	705	34	t	t	NOUN
fuelectenerg-7534	705	35	switches	switch	NOUN
fuelectenerg-7534	705	36	and	and	CCONJ
fuelectenerg-7534	705	37	dmtl	dmtl	PROPN
fuelectenerg-7534	705	38	structures	structure	NOUN
fuelectenerg-7534	705	39	”	"	PUNCT
fuelectenerg-7534	705	40	,	,	PUNCT
fuelectenerg-7534	705	41	journal	journal	NOUN
fuelectenerg-7534	705	42	of	of	ADP
fuelectenerg-7534	705	43	micromechanics	micromechanic	NOUN
fuelectenerg-7534	705	44	and	and	CCONJ
fuelectenerg-7534	705	45	microengineering	microengineering	NOUN
fuelectenerg-7534	705	46	,	,	PUNCT
fuelectenerg-7534	705	47	vol	vol	NOUN
fuelectenerg-7534	705	48	.	.	PROPN
fuelectenerg-7534	705	49	27	27	NUM
fuelectenerg-7534	705	50	,	,	PUNCT
fuelectenerg-7534	705	51	p.	p.	NOUN
fuelectenerg-7534	705	52	105010	105010	NUM
fuelectenerg-7534	705	53	,	,	PUNCT
fuelectenerg-7534	705	54	2017	2017	NUM
fuelectenerg-7534	705	55	.	.	PUNCT
fuelectenerg-7534	706	1	[	[	X
fuelectenerg-7534	706	2	83	83	NUM
fuelectenerg-7534	706	3	]	]	PUNCT
fuelectenerg-7534	706	4	a.	a.	NOUN
fuelectenerg-7534	706	5	s.	s.	PROPN
fuelectenerg-7534	706	6	abdellatif	abdellatif	PROPN
fuelectenerg-7534	706	7	,	,	PUNCT
fuelectenerg-7534	706	8	m.	m.	NOUN
fuelectenerg-7534	706	9	faraji	faraji	PROPN
fuelectenerg-7534	706	10	-	-	PUNCT
fuelectenerg-7534	706	11	dana	dana	PROPN
fuelectenerg-7534	706	12	,	,	PUNCT
fuelectenerg-7534	706	13	n.	n.	NOUN
fuelectenerg-7534	706	14	ranjkesh	ranjkesh	PROPN
fuelectenerg-7534	706	15	,	,	PUNCT
fuelectenerg-7534	706	16	a.	a.	NOUN
fuelectenerg-7534	706	17	taeb	taeb	PROPN
fuelectenerg-7534	706	18	,	,	PUNCT
fuelectenerg-7534	706	19	m.	m.	NOUN
fuelectenerg-7534	706	20	fahimnia	fahimnia	PROPN
fuelectenerg-7534	706	21	,	,	PUNCT
fuelectenerg-7534	706	22	s.	s.	PROPN
fuelectenerg-7534	706	23	gigoyan	gigoyan	PROPN
fuelectenerg-7534	706	24	,	,	PUNCT
fuelectenerg-7534	706	25	and	and	CCONJ
fuelectenerg-7534	706	26	s.	s.	PROPN
fuelectenerg-7534	706	27	safavinaeini	safavinaeini	PROPN
fuelectenerg-7534	706	28	,	,	PUNCT
fuelectenerg-7534	706	29	“	"	PUNCT
fuelectenerg-7534	706	30	low	low	ADJ
fuelectenerg-7534	706	31	loss	loss	NOUN
fuelectenerg-7534	706	32	,	,	PUNCT
fuelectenerg-7534	706	33	wideband	wideband	NOUN
fuelectenerg-7534	706	34	,	,	PUNCT
fuelectenerg-7534	706	35	and	and	CCONJ
fuelectenerg-7534	706	36	compact	compact	ADJ
fuelectenerg-7534	706	37	cpw	cpw	NOUN
fuelectenerg-7534	706	38	-	-	PUNCT
fuelectenerg-7534	706	39	based	base	VERB
fuelectenerg-7534	706	40	phase	phase	NOUN
fuelectenerg-7534	706	41	shifter	shifter	NOUN
fuelectenerg-7534	706	42	for	for	ADP
fuelectenerg-7534	706	43	millimeter	millimeter	NOUN
fuelectenerg-7534	706	44	-	-	PUNCT
fuelectenerg-7534	706	45	wave	wave	NOUN
fuelectenerg-7534	706	46	applications	application	NOUN
fuelectenerg-7534	706	47	”	"	PUNCT
fuelectenerg-7534	706	48	,	,	PUNCT
fuelectenerg-7534	706	49	ieee	ieee	NOUN
fuelectenerg-7534	706	50	transactions	transaction	NOUN
fuelectenerg-7534	706	51	on	on	ADP
fuelectenerg-7534	706	52	microwave	microwave	NOUN
fuelectenerg-7534	706	53	theory	theory	NOUN
fuelectenerg-7534	706	54	and	and	CCONJ
fuelectenerg-7534	706	55	techniques	technique	NOUN
fuelectenerg-7534	706	56	,	,	PUNCT
fuelectenerg-7534	706	57	vol	vol	NOUN
fuelectenerg-7534	706	58	.	.	PROPN
fuelectenerg-7534	706	59	62	62	NUM
fuelectenerg-7534	706	60	,	,	PUNCT
fuelectenerg-7534	706	61	no	no	INTJ
fuelectenerg-7534	706	62	.	.	NOUN
fuelectenerg-7534	706	63	12	12	NUM
fuelectenerg-7534	706	64	,	,	PUNCT
fuelectenerg-7534	706	65	pp	pp	ADJ
fuelectenerg-7534	706	66	.	.	PUNCT
fuelectenerg-7534	707	1	3403–3413	3403–3413	NUM
fuelectenerg-7534	707	2	,	,	PUNCT
fuelectenerg-7534	707	3	2014	2014	NUM
fuelectenerg-7534	707	4	.	.	PUNCT
fuelectenerg-7534	708	1	[	[	X
fuelectenerg-7534	708	2	84	84	NUM
fuelectenerg-7534	708	3	]	]	PUNCT
fuelectenerg-7534	708	4	s.	s.	PROPN
fuelectenerg-7534	708	5	dey	dey	PROPN
fuelectenerg-7534	708	6	,	,	PUNCT
fuelectenerg-7534	708	7	s.	s.	PROPN
fuelectenerg-7534	708	8	k.	k.	PROPN
fuelectenerg-7534	708	9	koul	koul	PROPN
fuelectenerg-7534	708	10	,	,	PUNCT
fuelectenerg-7534	708	11	a.	a.	PROPN
fuelectenerg-7534	708	12	k.	k.	PROPN
fuelectenerg-7534	708	13	poddar	poddar	PROPN
fuelectenerg-7534	708	14	,	,	PUNCT
fuelectenerg-7534	708	15	and	and	CCONJ
fuelectenerg-7534	708	16	u.	u.	PROPN
fuelectenerg-7534	708	17	l.	l.	PROPN
fuelectenerg-7534	708	18	rohde	rohde	PROPN
fuelectenerg-7534	708	19	,	,	PUNCT
fuelectenerg-7534	708	20	“	"	PUNCT
fuelectenerg-7534	708	21	reliable	reliable	ADJ
fuelectenerg-7534	708	22	and	and	CCONJ
fuelectenerg-7534	708	23	compact	compact	ADJ
fuelectenerg-7534	708	24	3and	3and	NUM
fuelectenerg-7534	708	25	4	4	NUM
fuelectenerg-7534	708	26	-	-	PUNCT
fuelectenerg-7534	708	27	bit	bit	NOUN
fuelectenerg-7534	708	28	phase	phase	NOUN
fuelectenerg-7534	708	29	shifters	shifter	NOUN
fuelectenerg-7534	708	30	using	use	VERB
fuelectenerg-7534	708	31	mems	mem	NOUN
fuelectenerg-7534	708	32	sp4	sp4	PROPN
fuelectenerg-7534	708	33	t	t	PROPN
fuelectenerg-7534	708	34	and	and	CCONJ
fuelectenerg-7534	708	35	sp8	sp8	PROPN
fuelectenerg-7534	708	36	t	t	PROPN
fuelectenerg-7534	708	37	switches	switch	NOUN
fuelectenerg-7534	708	38	”	"	PUNCT
fuelectenerg-7534	708	39	,	,	PUNCT
fuelectenerg-7534	708	40	journal	journal	NOUN
fuelectenerg-7534	708	41	of	of	ADP
fuelectenerg-7534	708	42	microelectromechanical	microelectromechanical	ADJ
fuelectenerg-7534	708	43	systems	system	NOUN
fuelectenerg-7534	708	44	,	,	PUNCT
fuelectenerg-7534	708	45	vol	vol	NOUN
fuelectenerg-7534	708	46	.	.	PROPN
fuelectenerg-7534	708	47	27	27	NUM
fuelectenerg-7534	708	48	,	,	PUNCT
fuelectenerg-7534	708	49	no	no	INTJ
fuelectenerg-7534	708	50	.	.	NOUN
fuelectenerg-7534	708	51	1	1	NUM
fuelectenerg-7534	708	52	,	,	PUNCT
fuelectenerg-7534	708	53	pp	pp	ADJ
fuelectenerg-7534	708	54	.	.	PUNCT
fuelectenerg-7534	709	1	113–124	113–124	NUM
fuelectenerg-7534	709	2	,	,	PUNCT
fuelectenerg-7534	709	3	2018	2018	NUM
fuelectenerg-7534	709	4	.	.	PUNCT
fuelectenerg-7534	710	1	[	[	X
fuelectenerg-7534	710	2	85	85	NUM
fuelectenerg-7534	710	3	]	]	X
fuelectenerg-7534	710	4	w.	w.	PROPN
fuelectenerg-7534	710	5	tian	tian	PROPN
fuelectenerg-7534	710	6	,	,	PUNCT
fuelectenerg-7534	710	7	y.	y.	PROPN
fuelectenerg-7534	710	8	zhang	zhang	PROPN
fuelectenerg-7534	710	9	,	,	PUNCT
fuelectenerg-7534	710	10	m.	m.	PROPN
fuelectenerg-7534	710	11	li	li	PROPN
fuelectenerg-7534	710	12	,	,	PUNCT
fuelectenerg-7534	710	13	z.	z.	PROPN
fuelectenerg-7534	710	14	xie	xie	PROPN
fuelectenerg-7534	710	15	,	,	PUNCT
fuelectenerg-7534	710	16	and	and	CCONJ
fuelectenerg-7534	710	17	w.	w.	PROPN
fuelectenerg-7534	710	18	li	li	PROPN
fuelectenerg-7534	710	19	,	,	PUNCT
fuelectenerg-7534	710	20	“	"	PUNCT
fuelectenerg-7534	710	21	5	5	NUM
fuelectenerg-7534	710	22	-	-	PUNCT
fuelectenerg-7534	710	23	bit	bit	NOUN
fuelectenerg-7534	710	24	spiral	spiral	ADJ
fuelectenerg-7534	710	25	distributed	distribute	VERB
fuelectenerg-7534	710	26	rf	rf	NOUN
fuelectenerg-7534	710	27	mems	mem	NOUN
fuelectenerg-7534	710	28	phase	phase	NOUN
fuelectenerg-7534	710	29	shifter	shifter	NOUN
fuelectenerg-7534	710	30	.	.	PUNCT
fuelectenerg-7534	711	1	in	in	ADP
fuelectenerg-7534	711	2	2019	2019	NUM
fuelectenerg-7534	711	3	ieee	ieee	NOUN
fuelectenerg-7534	711	4	19th	19th	ADJ
fuelectenerg-7534	711	5	international	international	ADJ
fuelectenerg-7534	711	6	conference	conference	NOUN
fuelectenerg-7534	711	7	on	on	ADP
fuelectenerg-7534	711	8	nanotechnology	nanotechnology	PROPN
fuelectenerg-7534	711	9	(	(	PUNCT
fuelectenerg-7534	711	10	ieee	ieee	NOUN
fuelectenerg-7534	711	11	-	-	PUNCT
fuelectenerg-7534	711	12	nano	nano	NOUN
fuelectenerg-7534	711	13	)	)	PUNCT
fuelectenerg-7534	711	14	”	"	PUNCT
fuelectenerg-7534	711	15	,	,	PUNCT
fuelectenerg-7534	711	16	2019	2019	NUM
fuelectenerg-7534	711	17	,	,	PUNCT
fuelectenerg-7534	711	18	pp	pp	ADJ
fuelectenerg-7534	711	19	.	.	PUNCT
fuelectenerg-7534	711	20	94–98	94–98	NUM
fuelectenerg-7534	711	21	.	.	PUNCT
fuelectenerg-7534	712	1	[	[	X
fuelectenerg-7534	712	2	86	86	NUM
fuelectenerg-7534	712	3	]	]	PUNCT
fuelectenerg-7534	712	4	b.	b.	PROPN
fuelectenerg-7534	712	5	belenger	belenger	PROPN
fuelectenerg-7534	712	6	,	,	PUNCT
fuelectenerg-7534	712	7	b.	b.	PROPN
fuelectenerg-7534	712	8	espana	espana	PROPN
fuelectenerg-7534	712	9	,	,	PUNCT
fuelectenerg-7534	712	10	s.	s.	PROPN
fuelectenerg-7534	712	11	courreges	courreges	PROPN
fuelectenerg-7534	712	12	,	,	PUNCT
fuelectenerg-7534	712	13	p.	p.	NOUN
fuelectenerg-7534	712	14	blondy	blondy	NOUN
fuelectenerg-7534	712	15	,	,	PUNCT
fuelectenerg-7534	712	16	o.	o.	NOUN
fuelectenerg-7534	712	17	vendier	vendier	NOUN
fuelectenerg-7534	712	18	,	,	PUNCT
fuelectenerg-7534	712	19	d.	d.	PROPN
fuelectenerg-7534	712	20	langrez	langrez	PROPN
fuelectenerg-7534	712	21	,	,	PUNCT
fuelectenerg-7534	712	22	and	and	CCONJ
fuelectenerg-7534	712	23	j.	j.	PROPN
fuelectenerg-7534	712	24	cazaux	cazaux	PROPN
fuelectenerg-7534	712	25	,	,	PUNCT
fuelectenerg-7534	712	26	“	"	PUNCT
fuelectenerg-7534	712	27	a	a	DET
fuelectenerg-7534	712	28	high	high	ADJ
fuelectenerg-7534	712	29	-	-	PUNCT
fuelectenerg-7534	712	30	power	power	NOUN
fuelectenerg-7534	712	31	ka	ka	NOUN
fuelectenerg-7534	712	32	-	-	PUNCT
fuelectenerg-7534	712	33	band	band	NOUN
fuelectenerg-7534	712	34	rf	rf	NOUN
fuelectenerg-7534	712	35	-	-	PUNCT
fuelectenerg-7534	712	36	mems	mems	ADJ
fuelectenerg-7534	712	37	2	2	NUM
fuelectenerg-7534	712	38	-	-	PUNCT
fuelectenerg-7534	712	39	bit	bit	NOUN
fuelectenerg-7534	712	40	phase	phase	NOUN
fuelectenerg-7534	712	41	shifter	shifter	NOUN
fuelectenerg-7534	712	42	on	on	ADP
fuelectenerg-7534	712	43	sapphire	sapphire	NOUN
fuelectenerg-7534	712	44	substrate	substrate	NOUN
fuelectenerg-7534	712	45	”	"	PUNCT
fuelectenerg-7534	712	46	,	,	PUNCT
fuelectenerg-7534	712	47	in	in	ADP
fuelectenerg-7534	712	48	proceedings	proceeding	NOUN
fuelectenerg-7534	712	49	of	of	ADP
fuelectenerg-7534	712	50	the	the	DET
fuelectenerg-7534	712	51	6th	6th	ADJ
fuelectenerg-7534	712	52	european	european	ADJ
fuelectenerg-7534	712	53	microwave	microwave	PROPN
fuelectenerg-7534	712	54	integrated	integrate	VERB
fuelectenerg-7534	712	55	circuit	circuit	NOUN
fuelectenerg-7534	712	56	conference	conference	NOUN
fuelectenerg-7534	712	57	,	,	PUNCT
fuelectenerg-7534	712	58	2011	2011	NUM
fuelectenerg-7534	712	59	,	,	PUNCT
fuelectenerg-7534	712	60	pp	pp	ADP
fuelectenerg-7534	712	61	164–167	164–167	NUM
fuelectenerg-7534	712	62	.	.	PUNCT
fuelectenerg-7534	713	1	[	[	X
fuelectenerg-7534	713	2	87	87	NUM
fuelectenerg-7534	713	3	]	]	PUNCT
fuelectenerg-7534	713	4	b.	b.	PROPN
fuelectenerg-7534	713	5	pillans	pillans	PROPN
fuelectenerg-7534	713	6	,	,	PUNCT
fuelectenerg-7534	713	7	l.	l.	PROPN
fuelectenerg-7534	713	8	coryell	coryell	PROPN
fuelectenerg-7534	713	9	,	,	PUNCT
fuelectenerg-7534	713	10	a.	a.	PROPN
fuelectenerg-7534	713	11	malczewski	malczewski	PROPN
fuelectenerg-7534	713	12	,	,	PUNCT
fuelectenerg-7534	713	13	c.	c.	PROPN
fuelectenerg-7534	713	14	moody	moody	PROPN
fuelectenerg-7534	713	15	,	,	PUNCT
fuelectenerg-7534	713	16	f.	f.	PROPN
fuelectenerg-7534	713	17	morris	morris	PROPN
fuelectenerg-7534	713	18	,	,	PUNCT
fuelectenerg-7534	713	19	and	and	CCONJ
fuelectenerg-7534	713	20	a.	a.	NOUN
fuelectenerg-7534	713	21	brown	brown	PROPN
fuelectenerg-7534	713	22	,	,	PUNCT
fuelectenerg-7534	713	23	“	"	PUNCT
fuelectenerg-7534	713	24	advances	advance	NOUN
fuelectenerg-7534	713	25	in	in	ADP
fuelectenerg-7534	713	26	rf	rf	NOUN
fuelectenerg-7534	713	27	mems	mem	NOUN
fuelectenerg-7534	713	28	phase	phase	NOUN
fuelectenerg-7534	713	29	shifters	shifter	NOUN
fuelectenerg-7534	713	30	from	from	ADP
fuelectenerg-7534	713	31	15	15	NUM
fuelectenerg-7534	713	32	ghz	ghz	NOUN
fuelectenerg-7534	713	33	to	to	ADP
fuelectenerg-7534	713	34	35	35	NUM
fuelectenerg-7534	713	35	ghz	ghz	NOUN
fuelectenerg-7534	713	36	”	"	PUNCT
fuelectenerg-7534	713	37	,	,	PUNCT
fuelectenerg-7534	713	38	in	in	ADP
fuelectenerg-7534	713	39	proceedings	proceeding	NOUN
fuelectenerg-7534	713	40	of	of	ADP
fuelectenerg-7534	713	41	the	the	DET
fuelectenerg-7534	713	42	ieee	ieee	NOUN
fuelectenerg-7534	713	43	/	/	SYM
fuelectenerg-7534	713	44	mtt	mtt	PROPN
fuelectenerg-7534	713	45	-	-	PUNCT
fuelectenerg-7534	713	46	s	s	NOUN
fuelectenerg-7534	713	47	international	international	ADJ
fuelectenerg-7534	713	48	microwave	microwave	NOUN
fuelectenerg-7534	713	49	symposium	symposium	NOUN
fuelectenerg-7534	713	50	digest	digest	PROPN
fuelectenerg-7534	713	51	,	,	PUNCT
fuelectenerg-7534	713	52	2012	2012	NUM
fuelectenerg-7534	713	53	,	,	PUNCT
fuelectenerg-7534	713	54	pp	pp	ADV
fuelectenerg-7534	713	55	.	.	PUNCT
fuelectenerg-7534	714	1	1–3	1–3	NOUN
fuelectenerg-7534	714	2	.	.	PUNCT
fuelectenerg-7534	715	1	[	[	X
fuelectenerg-7534	715	2	88	88	NUM
fuelectenerg-7534	715	3	]	]	X
fuelectenerg-7534	715	4	c.	c.	PROPN
fuelectenerg-7534	715	5	ko	ko	PROPN
fuelectenerg-7534	715	6	,	,	PUNCT
fuelectenerg-7534	715	7	k.	k.	PROPN
fuelectenerg-7534	715	8	m.	m.	PROPN
fuelectenerg-7534	715	9	j.	j.	PROPN
fuelectenerg-7534	715	10	ho	ho	PROPN
fuelectenerg-7534	715	11	,	,	PUNCT
fuelectenerg-7534	715	12	and	and	CCONJ
fuelectenerg-7534	715	13	g.	g.	PROPN
fuelectenerg-7534	715	14	m.	m.	PROPN
fuelectenerg-7534	715	15	rebeiz	rebeiz	PROPN
fuelectenerg-7534	715	16	,	,	PUNCT
fuelectenerg-7534	715	17	“	"	PUNCT
fuelectenerg-7534	715	18	an	an	DET
fuelectenerg-7534	715	19	electronically	electronically	ADV
fuelectenerg-7534	715	20	-	-	PUNCT
fuelectenerg-7534	715	21	scanned	scan	VERB
fuelectenerg-7534	715	22	1.8	1.8	NUM
fuelectenerg-7534	715	23	-	-	SYM
fuelectenerg-7534	715	24	2.1	2.1	NUM
fuelectenerg-7534	715	25	ghz	ghz	NOUN
fuelectenerg-7534	715	26	base	base	NOUN
fuelectenerg-7534	715	27	-	-	PUNCT
fuelectenerg-7534	715	28	station	station	NOUN
fuelectenerg-7534	715	29	antenna	antenna	NOUN
fuelectenerg-7534	715	30	using	use	VERB
fuelectenerg-7534	715	31	packaged	package	VERB
fuelectenerg-7534	715	32	high	high	ADJ
fuelectenerg-7534	715	33	-	-	PUNCT
fuelectenerg-7534	715	34	reliability	reliability	NOUN
fuelectenerg-7534	715	35	rf	rf	NOUN
fuelectenerg-7534	715	36	mems	mem	NOUN
fuelectenerg-7534	715	37	phase	phase	NOUN
fuelectenerg-7534	715	38	shifters	shifter	NOUN
fuelectenerg-7534	715	39	”	"	PUNCT
fuelectenerg-7534	715	40	,	,	PUNCT
fuelectenerg-7534	715	41	ieee	ieee	NOUN
fuelectenerg-7534	715	42	transactions	transaction	NOUN
fuelectenerg-7534	715	43	on	on	ADP
fuelectenerg-7534	715	44	microwave	microwave	NOUN
fuelectenerg-7534	715	45	theory	theory	NOUN
fuelectenerg-7534	715	46	and	and	CCONJ
fuelectenerg-7534	715	47	techniques	technique	NOUN
fuelectenerg-7534	715	48	,	,	PUNCT
fuelectenerg-7534	715	49	vol	vol	NOUN
fuelectenerg-7534	715	50	.	.	PROPN
fuelectenerg-7534	715	51	61	61	NUM
fuelectenerg-7534	715	52	,	,	PUNCT
fuelectenerg-7534	715	53	no	no	INTJ
fuelectenerg-7534	715	54	.	.	NOUN
fuelectenerg-7534	715	55	2	2	NUM
fuelectenerg-7534	715	56	,	,	PUNCT
fuelectenerg-7534	715	57	pp	pp	ADJ
fuelectenerg-7534	715	58	.	.	PUNCT
fuelectenerg-7534	716	1	979–985	979–985	NUM
fuelectenerg-7534	716	2	,	,	PUNCT
fuelectenerg-7534	716	3	2013	2013	NUM
fuelectenerg-7534	716	4	.	.	PUNCT
fuelectenerg-7534	717	1	[	[	X
fuelectenerg-7534	717	2	89	89	NUM
fuelectenerg-7534	717	3	]	]	PUNCT
fuelectenerg-7534	717	4	x.	x.	NOUN
fuelectenerg-7534	717	5	li	li	PROPN
fuelectenerg-7534	717	6	,	,	PUNCT
fuelectenerg-7534	717	7	k.	k.	PROPN
fuelectenerg-7534	717	8	y.	y.	PROPN
fuelectenerg-7534	717	9	chan	chan	PROPN
fuelectenerg-7534	717	10	,	,	PUNCT
fuelectenerg-7534	717	11	and	and	CCONJ
fuelectenerg-7534	717	12	r.	r.	PROPN
fuelectenerg-7534	717	13	ramer	ramer	PROPN
fuelectenerg-7534	717	14	,	,	PUNCT
fuelectenerg-7534	717	15	“	"	PUNCT
fuelectenerg-7534	717	16	e	e	NOUN
fuelectenerg-7534	717	17	-	-	NOUN
fuelectenerg-7534	717	18	band	band	ADJ
fuelectenerg-7534	717	19	rf	rf	ADJ
fuelectenerg-7534	717	20	mems	mems	PROPN
fuelectenerg-7534	717	21	differential	differential	ADJ
fuelectenerg-7534	717	22	reflection	reflection	NOUN
fuelectenerg-7534	717	23	-	-	PUNCT
fuelectenerg-7534	717	24	type	type	NOUN
fuelectenerg-7534	717	25	phase	phase	NOUN
fuelectenerg-7534	717	26	shifter	shifter	NOUN
fuelectenerg-7534	717	27	”	"	PUNCT
fuelectenerg-7534	717	28	,	,	PUNCT
fuelectenerg-7534	717	29	ieee	ieee	NOUN
fuelectenerg-7534	717	30	transactions	transaction	NOUN
fuelectenerg-7534	717	31	on	on	ADP
fuelectenerg-7534	717	32	microwave	microwave	NOUN
fuelectenerg-7534	717	33	theory	theory	NOUN
fuelectenerg-7534	717	34	and	and	CCONJ
fuelectenerg-7534	717	35	techniques	technique	NOUN
fuelectenerg-7534	717	36	,	,	PUNCT
fuelectenerg-7534	717	37	vol	vol	NOUN
fuelectenerg-7534	717	38	.	.	PROPN
fuelectenerg-7534	717	39	67	67	NUM
fuelectenerg-7534	717	40	,	,	PUNCT
fuelectenerg-7534	717	41	no	no	INTJ
fuelectenerg-7534	717	42	.	.	NOUN
fuelectenerg-7534	717	43	12	12	NUM
fuelectenerg-7534	717	44	,	,	PUNCT
fuelectenerg-7534	717	45	pp	pp	ADJ
fuelectenerg-7534	717	46	.	.	PUNCT
fuelectenerg-7534	718	1	4700–4713	4700–4713	NUM
fuelectenerg-7534	718	2	,	,	PUNCT
fuelectenerg-7534	718	3	2019	2019	NUM
fuelectenerg-7534	718	4	.	.	PUNCT
fuelectenerg-7534	719	1	[	[	X
fuelectenerg-7534	719	2	90	90	NUM
fuelectenerg-7534	719	3	]	]	X
fuelectenerg-7534	719	4	o.	o.	PROPN
fuelectenerg-7534	719	5	d.	d.	PROPN
fuelectenerg-7534	719	6	gurbuz	gurbuz	PROPN
fuelectenerg-7534	719	7	and	and	CCONJ
fuelectenerg-7534	719	8	g.	g.	PROPN
fuelectenerg-7534	719	9	m.	m.	PROPN
fuelectenerg-7534	719	10	rebeiz	rebeiz	PROPN
fuelectenerg-7534	719	11	,	,	PUNCT
fuelectenerg-7534	719	12	“	"	PUNCT
fuelectenerg-7534	719	13	a	a	DET
fuelectenerg-7534	719	14	1.6{2.3	1.6{2.3	NUM
fuelectenerg-7534	719	15	-	-	PUNCT
fuelectenerg-7534	719	16	ghz	ghz	NOUN
fuelectenerg-7534	719	17	rf	rf	NOUN
fuelectenerg-7534	719	18	mems	mem	NOUN
fuelectenerg-7534	719	19	reconfigurable	reconfigurable	ADJ
fuelectenerg-7534	719	20	quadrature	quadrature	NOUN
fuelectenerg-7534	719	21	coupler	coupler	NOUN
fuelectenerg-7534	719	22	and	and	CCONJ
fuelectenerg-7534	719	23	its	its	PRON
fuelectenerg-7534	719	24	application	application	NOUN
fuelectenerg-7534	719	25	to	to	ADP
fuelectenerg-7534	719	26	a	a	DET
fuelectenerg-7534	719	27	360	360	NUM
fuelectenerg-7534	719	28	reflective	reflective	ADJ
fuelectenerg-7534	719	29	-	-	PUNCT
fuelectenerg-7534	719	30	type	type	NOUN
fuelectenerg-7534	719	31	phase	phase	NOUN
fuelectenerg-7534	719	32	shifter	shifter	NOUN
fuelectenerg-7534	719	33	”	"	PUNCT
fuelectenerg-7534	719	34	,	,	PUNCT
fuelectenerg-7534	719	35	ieee	ieee	NOUN
fuelectenerg-7534	719	36	transactions	transaction	NOUN
fuelectenerg-7534	719	37	on	on	ADP
fuelectenerg-7534	719	38	microwave	microwave	NOUN
fuelectenerg-7534	719	39	theory	theory	NOUN
fuelectenerg-7534	719	40	and	and	CCONJ
fuelectenerg-7534	719	41	techniques	technique	NOUN
fuelectenerg-7534	719	42	,	,	PUNCT
fuelectenerg-7534	719	43	vol	vol	NOUN
fuelectenerg-7534	719	44	.	.	PROPN
fuelectenerg-7534	719	45	63	63	NUM
fuelectenerg-7534	719	46	,	,	PUNCT
fuelectenerg-7534	719	47	no	no	INTJ
fuelectenerg-7534	719	48	.	.	NOUN
fuelectenerg-7534	719	49	2	2	NUM
fuelectenerg-7534	719	50	,	,	PUNCT
fuelectenerg-7534	719	51	pp	pp	ADJ
fuelectenerg-7534	719	52	.	.	PUNCT
fuelectenerg-7534	720	1	414–421	414–421	NUM
fuelectenerg-7534	720	2	,	,	PUNCT
fuelectenerg-7534	720	3	2015	2015	NUM
fuelectenerg-7534	720	4	.	.	PUNCT
fuelectenerg-7534	721	1	[	[	X
fuelectenerg-7534	721	2	91	91	X
fuelectenerg-7534	721	3	]	]	PUNCT
fuelectenerg-7534	722	1	p.	p.	NOUN
fuelectenerg-7534	722	2	k.	k.	PROPN
fuelectenerg-7534	723	1	shrivastava	shrivastava	PROPN
fuelectenerg-7534	723	2	,	,	PUNCT
fuelectenerg-7534	723	3	s.	s.	PROPN
fuelectenerg-7534	723	4	k.	k.	PROPN
fuelectenerg-7534	723	5	koul	koul	PROPN
fuelectenerg-7534	723	6	,	,	PUNCT
fuelectenerg-7534	723	7	and	and	CCONJ
fuelectenerg-7534	723	8	m.	m.	NOUN
fuelectenerg-7534	723	9	p.	p.	NOUN
fuelectenerg-7534	723	10	abegaonkar	abegaonkar	PROPN
fuelectenerg-7534	723	11	,	,	PUNCT
fuelectenerg-7534	723	12	“	"	PUNCT
fuelectenerg-7534	723	13	compact	compact	ADJ
fuelectenerg-7534	723	14	k	k	ADJ
fuelectenerg-7534	723	15	-	-	PUNCT
fuelectenerg-7534	723	16	band	band	NOUN
fuelectenerg-7534	723	17	lange	lange	NOUN
fuelectenerg-7534	723	18	coupler	coupler	NOUN
fuelectenerg-7534	723	19	based	base	VERB
fuelectenerg-7534	723	20	2	2	NUM
fuelectenerg-7534	723	21	-	-	PUNCT
fuelectenerg-7534	723	22	bit	bit	NOUN
fuelectenerg-7534	723	23	rf	rf	ADJ
fuelectenerg-7534	723	24	mems	mem	NOUN
fuelectenerg-7534	723	25	reflection	reflection	NOUN
fuelectenerg-7534	723	26	-	-	PUNCT
fuelectenerg-7534	723	27	type	type	NOUN
fuelectenerg-7534	723	28	phase	phase	NOUN
fuelectenerg-7534	723	29	shifter	shifter	NOUN
fuelectenerg-7534	723	30	”	"	PUNCT
fuelectenerg-7534	723	31	,	,	PUNCT
fuelectenerg-7534	723	32	in	in	ADP
fuelectenerg-7534	723	33	proceedings	proceeding	NOUN
fuelectenerg-7534	723	34	of	of	ADP
fuelectenerg-7534	723	35	the	the	DET
fuelectenerg-7534	723	36	2018	2018	NUM
fuelectenerg-7534	723	37	ieee	ieee	NOUN
fuelectenerg-7534	723	38	mtt	mtt	PROPN
fuelectenerg-7534	723	39	-	-	PUNCT
fuelectenerg-7534	723	40	s	s	NOUN
fuelectenerg-7534	723	41	international	international	ADJ
fuelectenerg-7534	723	42	microwave	microwave	NOUN
fuelectenerg-7534	723	43	and	and	CCONJ
fuelectenerg-7534	723	44	rf	rf	PROPN
fuelectenerg-7534	723	45	conference	conference	NOUN
fuelectenerg-7534	723	46	(	(	PUNCT
fuelectenerg-7534	723	47	imarc	imarc	PROPN
fuelectenerg-7534	723	48	)	)	PUNCT
fuelectenerg-7534	723	49	,	,	PUNCT
fuelectenerg-7534	723	50	2018	2018	NUM
fuelectenerg-7534	723	51	,	,	PUNCT
fuelectenerg-7534	723	52	pp	pp	ADJ
fuelectenerg-7534	723	53	.	.	PUNCT
fuelectenerg-7534	724	1	1–4	1–4	PROPN
fuelectenerg-7534	724	2	.	.	PUNCT
fuelectenerg-7534	725	1	a	a	DET
fuelectenerg-7534	725	2	comprehensive	comprehensive	ADJ
fuelectenerg-7534	725	3	overview	overview	NOUN
fuelectenerg-7534	725	4	of	of	ADP
fuelectenerg-7534	725	5	recent	recent	ADJ
fuelectenerg-7534	725	6	developments	development	NOUN
fuelectenerg-7534	725	7	in	in	ADP
fuelectenerg-7534	725	8	rf	rf	ADJ
fuelectenerg-7534	725	9	-	-	PUNCT
fuelectenerg-7534	725	10	mems	mems	ADJ
fuelectenerg-7534	725	11	technology	technology	NOUN
fuelectenerg-7534	725	12	365	365	NUM
fuelectenerg-7534	725	13	[	[	SYM
fuelectenerg-7534	725	14	92	92	NUM
fuelectenerg-7534	725	15	]	]	PUNCT
fuelectenerg-7534	725	16	t.	t.	PROPN
fuelectenerg-7534	725	17	singh	singh	PROPN
fuelectenerg-7534	725	18	,	,	PUNCT
fuelectenerg-7534	725	19	n.	n.	PROPN
fuelectenerg-7534	725	20	k.	k.	PROPN
fuelectenerg-7534	725	21	khaira	khaira	PROPN
fuelectenerg-7534	725	22	,	,	PUNCT
fuelectenerg-7534	725	23	and	and	CCONJ
fuelectenerg-7534	725	24	r.	r.	PROPN
fuelectenerg-7534	725	25	r.	r.	PROPN
fuelectenerg-7534	725	26	mansour	mansour	PROPN
fuelectenerg-7534	725	27	,	,	PUNCT
fuelectenerg-7534	725	28	“	"	PUNCT
fuelectenerg-7534	725	29	thermally	thermally	ADV
fuelectenerg-7534	725	30	actuated	actuate	VERB
fuelectenerg-7534	725	31	soi	soi	ADJ
fuelectenerg-7534	725	32	rf	rf	NOUN
fuelectenerg-7534	725	33	mems	mem	NOUN
fuelectenerg-7534	725	34	-	-	PUNCT
fuelectenerg-7534	725	35	based	base	VERB
fuelectenerg-7534	725	36	fully	fully	ADV
fuelectenerg-7534	725	37	integrated	integrate	VERB
fuelectenerg-7534	725	38	passive	passive	ADJ
fuelectenerg-7534	725	39	reflective	reflective	ADJ
fuelectenerg-7534	725	40	-	-	PUNCT
fuelectenerg-7534	725	41	type	type	NOUN
fuelectenerg-7534	725	42	analog	analog	NOUN
fuelectenerg-7534	725	43	phase	phase	NOUN
fuelectenerg-7534	725	44	shifter	shifter	NOUN
fuelectenerg-7534	725	45	for	for	ADP
fuelectenerg-7534	725	46	mmwave	mmwave	NOUN
fuelectenerg-7534	725	47	applications	application	NOUN
fuelectenerg-7534	725	48	”	"	PUNCT
fuelectenerg-7534	725	49	,	,	PUNCT
fuelectenerg-7534	725	50	ieee	ieee	NOUN
fuelectenerg-7534	725	51	transactions	transaction	NOUN
fuelectenerg-7534	725	52	on	on	ADP
fuelectenerg-7534	725	53	microwave	microwave	NOUN
fuelectenerg-7534	725	54	theory	theory	NOUN
fuelectenerg-7534	725	55	and	and	CCONJ
fuelectenerg-7534	725	56	techniques	technique	NOUN
fuelectenerg-7534	725	57	,	,	PUNCT
fuelectenerg-7534	725	58	pp	pp	ADV
fuelectenerg-7534	725	59	.	.	PUNCT
fuelectenerg-7534	726	1	1–4	1–4	NUM
fuelectenerg-7534	726	2	,	,	PUNCT
fuelectenerg-7534	726	3	2020	2020	NUM
fuelectenerg-7534	726	4	.	.	PUNCT
fuelectenerg-7534	727	1	[	[	X
fuelectenerg-7534	727	2	93	93	X
fuelectenerg-7534	727	3	]	]	PUNCT
fuelectenerg-7534	727	4	j.	j.	PROPN
fuelectenerg-7534	727	5	iannacci	iannacci	PROPN
fuelectenerg-7534	727	6	,	,	PUNCT
fuelectenerg-7534	727	7	f.	f.	PROPN
fuelectenerg-7534	727	8	giacomozzi	giacomozzi	PROPN
fuelectenerg-7534	727	9	,	,	PUNCT
fuelectenerg-7534	727	10	s.	s.	PROPN
fuelectenerg-7534	727	11	colpo	colpo	PROPN
fuelectenerg-7534	727	12	,	,	PUNCT
fuelectenerg-7534	727	13	b.	b.	PROPN
fuelectenerg-7534	727	14	margesin	margesin	PROPN
fuelectenerg-7534	727	15	,	,	PUNCT
fuelectenerg-7534	727	16	and	and	CCONJ
fuelectenerg-7534	727	17	m.	m.	NOUN
fuelectenerg-7534	727	18	bartek	bartek	PROPN
fuelectenerg-7534	727	19	,	,	PUNCT
fuelectenerg-7534	727	20	“	"	PUNCT
fuelectenerg-7534	727	21	a	a	DET
fuelectenerg-7534	727	22	general	general	ADJ
fuelectenerg-7534	727	23	purpose	purpose	NOUN
fuelectenerg-7534	727	24	reconfigurable	reconfigurable	NOUN
fuelectenerg-7534	727	25	mems	mem	NOUN
fuelectenerg-7534	727	26	-	-	PUNCT
fuelectenerg-7534	727	27	based	base	VERB
fuelectenerg-7534	727	28	attenuator	attenuator	NOUN
fuelectenerg-7534	727	29	for	for	ADP
fuelectenerg-7534	727	30	radio	radio	NOUN
fuelectenerg-7534	727	31	frequency	frequency	NOUN
fuelectenerg-7534	727	32	and	and	CCONJ
fuelectenerg-7534	727	33	microwave	microwave	NOUN
fuelectenerg-7534	727	34	applications	application	NOUN
fuelectenerg-7534	727	35	”	"	PUNCT
fuelectenerg-7534	727	36	,	,	PUNCT
fuelectenerg-7534	727	37	in	in	ADP
fuelectenerg-7534	727	38	proceedings	proceeding	NOUN
fuelectenerg-7534	727	39	of	of	ADP
fuelectenerg-7534	727	40	the	the	DET
fuelectenerg-7534	727	41	ieee	ieee	NOUN
fuelectenerg-7534	727	42	eurocon	eurocon	NOUN
fuelectenerg-7534	727	43	2009	2009	NUM
fuelectenerg-7534	727	44	,	,	PUNCT
fuelectenerg-7534	727	45	2009	2009	NUM
fuelectenerg-7534	727	46	,	,	PUNCT
fuelectenerg-7534	727	47	pp	pp	ADJ
fuelectenerg-7534	727	48	.	.	PUNCT
fuelectenerg-7534	728	1	1197–1205	1197–1205	NUM
fuelectenerg-7534	728	2	.	.	PUNCT
fuelectenerg-7534	729	1	[	[	X
fuelectenerg-7534	729	2	94	94	X
fuelectenerg-7534	729	3	]	]	X
fuelectenerg-7534	729	4	j.	j.	PROPN
fuelectenerg-7534	729	5	iannacci	iannacci	PROPN
fuelectenerg-7534	729	6	,	,	PUNCT
fuelectenerg-7534	729	7	a.	a.	NOUN
fuelectenerg-7534	729	8	faes	faes	PROPN
fuelectenerg-7534	729	9	,	,	PUNCT
fuelectenerg-7534	729	10	f.	f.	PROPN
fuelectenerg-7534	729	11	mastri	mastri	PROPN
fuelectenerg-7534	729	12	,	,	PUNCT
fuelectenerg-7534	729	13	d.	d.	PROPN
fuelectenerg-7534	729	14	masotti	masotti	PROPN
fuelectenerg-7534	729	15	,	,	PUNCT
fuelectenerg-7534	729	16	and	and	CCONJ
fuelectenerg-7534	729	17	v.	v.	ADP
fuelectenerg-7534	729	18	rizzoli	rizzoli	NOUN
fuelectenerg-7534	729	19	,	,	PUNCT
fuelectenerg-7534	729	20	“	"	PUNCT
fuelectenerg-7534	729	21	a	a	DET
fuelectenerg-7534	729	22	mems	mem	NOUN
fuelectenerg-7534	729	23	-	-	PUNCT
fuelectenerg-7534	729	24	based	base	VERB
fuelectenerg-7534	729	25	wideband	wideband	NOUN
fuelectenerg-7534	729	26	multi	multi	ADJ
fuelectenerg-7534	729	27	-	-	ADJ
fuelectenerg-7534	729	28	state	state	ADJ
fuelectenerg-7534	729	29	power	power	NOUN
fuelectenerg-7534	729	30	attenuator	attenuator	NOUN
fuelectenerg-7534	729	31	for	for	ADP
fuelectenerg-7534	729	32	radio	radio	NOUN
fuelectenerg-7534	729	33	frequency	frequency	NOUN
fuelectenerg-7534	729	34	and	and	CCONJ
fuelectenerg-7534	729	35	microwave	microwave	NOUN
fuelectenerg-7534	729	36	applications	application	NOUN
fuelectenerg-7534	729	37	”	"	PUNCT
fuelectenerg-7534	729	38	,	,	PUNCT
fuelectenerg-7534	729	39	in	in	ADP
fuelectenerg-7534	729	40	proceedings	proceeding	NOUN
fuelectenerg-7534	729	41	of	of	ADP
fuelectenerg-7534	729	42	the	the	DET
fuelectenerg-7534	729	43	techconnect	techconnect	ADJ
fuelectenerg-7534	729	44	world	world	NOUN
fuelectenerg-7534	729	45	,	,	PUNCT
fuelectenerg-7534	729	46	nsti	nsti	NOUN
fuelectenerg-7534	729	47	nanotech	nanotech	PROPN
fuelectenerg-7534	729	48	2010	2010	NUM
fuelectenerg-7534	729	49	,	,	PUNCT
fuelectenerg-7534	729	50	vol	vol	NOUN
fuelectenerg-7534	729	51	.	.	PROPN
fuelectenerg-7534	729	52	2	2	NUM
fuelectenerg-7534	729	53	,	,	PUNCT
fuelectenerg-7534	729	54	pp	pp	ADJ
fuelectenerg-7534	729	55	.	.	PUNCT
fuelectenerg-7534	730	1	328–331	328–331	NUM
fuelectenerg-7534	730	2	.	.	PUNCT
fuelectenerg-7534	731	1	[	[	X
fuelectenerg-7534	731	2	95	95	NUM
fuelectenerg-7534	731	3	]	]	PUNCT
fuelectenerg-7534	731	4	x.	x.	NOUN
fuelectenerg-7534	731	5	guo	guo	PROPN
fuelectenerg-7534	731	6	,	,	PUNCT
fuelectenerg-7534	731	7	z.	z.	PROPN
fuelectenerg-7534	731	8	gong	gong	PROPN
fuelectenerg-7534	731	9	,	,	PUNCT
fuelectenerg-7534	731	10	q.	q.	PROPN
fuelectenerg-7534	731	11	zhong	zhong	PROPN
fuelectenerg-7534	731	12	,	,	PUNCT
fuelectenerg-7534	731	13	x.	x.	PROPN
fuelectenerg-7534	731	14	liang	liang	PROPN
fuelectenerg-7534	731	15	,	,	PUNCT
fuelectenerg-7534	731	16	and	and	CCONJ
fuelectenerg-7534	731	17	z.	z.	PROPN
fuelectenerg-7534	731	18	liu	liu	PROPN
fuelectenerg-7534	731	19	,	,	PUNCT
fuelectenerg-7534	731	20	“	"	PUNCT
fuelectenerg-7534	731	21	a	a	DET
fuelectenerg-7534	731	22	miniaturized	miniaturize	VERB
fuelectenerg-7534	731	23	reconfigurable	reconfigurable	ADJ
fuelectenerg-7534	731	24	broadband	broadband	NOUN
fuelectenerg-7534	731	25	attenuator	attenuator	NOUN
fuelectenerg-7534	731	26	based	base	VERB
fuelectenerg-7534	731	27	on	on	ADP
fuelectenerg-7534	731	28	rf	rf	NOUN
fuelectenerg-7534	731	29	mems	mem	NOUN
fuelectenerg-7534	731	30	switches	switch	NOUN
fuelectenerg-7534	731	31	”	"	PUNCT
fuelectenerg-7534	731	32	,	,	PUNCT
fuelectenerg-7534	731	33	journal	journal	NOUN
fuelectenerg-7534	731	34	of	of	ADP
fuelectenerg-7534	731	35	micromechanics	micromechanic	NOUN
fuelectenerg-7534	731	36	and	and	CCONJ
fuelectenerg-7534	731	37	microengineering	microengineering	NOUN
fuelectenerg-7534	731	38	,	,	PUNCT
fuelectenerg-7534	731	39	vol	vol	NOUN
fuelectenerg-7534	731	40	.	.	PROPN
fuelectenerg-7534	731	41	26	26	NUM
fuelectenerg-7534	731	42	,	,	PUNCT
fuelectenerg-7534	731	43	p.	p.	NOUN
fuelectenerg-7534	731	44	074002	074002	NUM
fuelectenerg-7534	731	45	,	,	PUNCT
fuelectenerg-7534	731	46	2016	2016	NUM
fuelectenerg-7534	731	47	.	.	PUNCT
fuelectenerg-7534	732	1	[	[	X
fuelectenerg-7534	732	2	96	96	NUM
fuelectenerg-7534	732	3	]	]	X
fuelectenerg-7534	732	4	j.	j.	PROPN
fuelectenerg-7534	732	5	sun	sun	PROPN
fuelectenerg-7534	732	6	,	,	PUNCT
fuelectenerg-7534	732	7	j.	j.	PROPN
fuelectenerg-7534	732	8	zhu	zhu	PROPN
fuelectenerg-7534	732	9	,	,	PUNCT
fuelectenerg-7534	732	10	l.	l.	PROPN
fuelectenerg-7534	732	11	jiang	jiang	PROPN
fuelectenerg-7534	732	12	,	,	PUNCT
fuelectenerg-7534	732	13	y.	y.	PROPN
fuelectenerg-7534	732	14	yu	yu	PROPN
fuelectenerg-7534	732	15	,	,	PUNCT
fuelectenerg-7534	732	16	and	and	CCONJ
fuelectenerg-7534	732	17	z.	z.	PROPN
fuelectenerg-7534	732	18	li	li	PROPN
fuelectenerg-7534	732	19	,	,	PUNCT
fuelectenerg-7534	732	20	“	"	PUNCT
fuelectenerg-7534	732	21	a	a	DET
fuelectenerg-7534	732	22	broadband	broadband	NOUN
fuelectenerg-7534	732	23	dc	dc	PROPN
fuelectenerg-7534	732	24	to	to	ADP
fuelectenerg-7534	732	25	20	20	NUM
fuelectenerg-7534	732	26	ghz	ghz	NOUN
fuelectenerg-7534	732	27	3	3	NUM
fuelectenerg-7534	732	28	-	-	PUNCT
fuelectenerg-7534	732	29	bit	bit	NOUN
fuelectenerg-7534	732	30	mems	mems	ADJ
fuelectenerg-7534	732	31	digital	digital	ADJ
fuelectenerg-7534	732	32	attenuator	attenuator	NOUN
fuelectenerg-7534	732	33	”	"	PUNCT
fuelectenerg-7534	732	34	,	,	PUNCT
fuelectenerg-7534	732	35	journal	journal	NOUN
fuelectenerg-7534	732	36	of	of	ADP
fuelectenerg-7534	732	37	micromechanics	micromechanic	NOUN
fuelectenerg-7534	732	38	and	and	CCONJ
fuelectenerg-7534	732	39	microengineering	microengineering	NOUN
fuelectenerg-7534	732	40	,	,	PUNCT
fuelectenerg-7534	732	41	vol	vol	NOUN
fuelectenerg-7534	732	42	.	.	PROPN
fuelectenerg-7534	732	43	26	26	NUM
fuelectenerg-7534	732	44	,	,	PUNCT
fuelectenerg-7534	732	45	p.	p.	NOUN
fuelectenerg-7534	732	46	055005	055005	NUM
fuelectenerg-7534	732	47	,	,	PUNCT
fuelectenerg-7534	732	48	05	05	NUM
fuelectenerg-7534	732	49	2016	2016	NUM
fuelectenerg-7534	732	50	.	.	PUNCT
fuelectenerg-7534	733	1	[	[	X
fuelectenerg-7534	733	2	97	97	NUM
fuelectenerg-7534	733	3	]	]	PUNCT
fuelectenerg-7534	733	4	j.	j.	PROPN
fuelectenerg-7534	733	5	iannacci	iannacci	PROPN
fuelectenerg-7534	733	6	,	,	PUNCT
fuelectenerg-7534	733	7	m.	m.	NOUN
fuelectenerg-7534	733	8	huhn	huhn	PROPN
fuelectenerg-7534	733	9	,	,	PUNCT
fuelectenerg-7534	733	10	c.	c.	PROPN
fuelectenerg-7534	733	11	tschoban	tschoban	PROPN
fuelectenerg-7534	733	12	,	,	PUNCT
fuelectenerg-7534	733	13	and	and	CCONJ
fuelectenerg-7534	733	14	h.	h.	PROPN
fuelectenerg-7534	733	15	potter	potter	PROPN
fuelectenerg-7534	733	16	,	,	PUNCT
fuelectenerg-7534	733	17	“	"	PUNCT
fuelectenerg-7534	733	18	rf	rf	ADJ
fuelectenerg-7534	733	19	-	-	PUNCT
fuelectenerg-7534	733	20	mems	mems	ADJ
fuelectenerg-7534	733	21	technology	technology	NOUN
fuelectenerg-7534	733	22	for	for	ADP
fuelectenerg-7534	733	23	future	future	ADJ
fuelectenerg-7534	733	24	mobile	mobile	ADJ
fuelectenerg-7534	733	25	and	and	CCONJ
fuelectenerg-7534	733	26	highfrequency	highfrequency	NOUN
fuelectenerg-7534	733	27	applications	application	NOUN
fuelectenerg-7534	733	28	:	:	PUNCT
fuelectenerg-7534	733	29	reconfigurable	reconfigurable	ADJ
fuelectenerg-7534	733	30	8	8	NUM
fuelectenerg-7534	733	31	-	-	PUNCT
fuelectenerg-7534	733	32	bit	bit	NOUN
fuelectenerg-7534	733	33	power	power	NOUN
fuelectenerg-7534	733	34	attenuator	attenuator	NOUN
fuelectenerg-7534	733	35	tested	test	VERB
fuelectenerg-7534	733	36	up	up	ADP
fuelectenerg-7534	733	37	to	to	ADP
fuelectenerg-7534	733	38	110	110	NUM
fuelectenerg-7534	733	39	ghz	ghz	NOUN
fuelectenerg-7534	733	40	”	"	PUNCT
fuelectenerg-7534	733	41	,	,	PUNCT
fuelectenerg-7534	733	42	ieee	ieee	NOUN
fuelectenerg-7534	733	43	electron	electron	NOUN
fuelectenerg-7534	733	44	device	device	NOUN
fuelectenerg-7534	733	45	letters	letter	NOUN
fuelectenerg-7534	733	46	,	,	PUNCT
fuelectenerg-7534	733	47	vol	vol	NOUN
fuelectenerg-7534	733	48	.	.	PROPN
fuelectenerg-7534	734	1	37	37	NUM
fuelectenerg-7534	734	2	,	,	PUNCT
fuelectenerg-7534	734	3	no	no	INTJ
fuelectenerg-7534	734	4	.	.	NOUN
fuelectenerg-7534	734	5	12	12	NUM
fuelectenerg-7534	734	6	,	,	PUNCT
fuelectenerg-7534	734	7	pp	pp	ADJ
fuelectenerg-7534	734	8	.	.	PUNCT
fuelectenerg-7534	735	1	1646–1649	1646–1649	NUM
fuelectenerg-7534	735	2	,	,	PUNCT
fuelectenerg-7534	735	3	2016	2016	NUM
fuelectenerg-7534	735	4	.	.	PUNCT
fuelectenerg-7534	736	1	[	[	X
fuelectenerg-7534	736	2	98	98	NUM
fuelectenerg-7534	736	3	]	]	PUNCT
fuelectenerg-7534	736	4	a.	a.	NOUN
fuelectenerg-7534	736	5	raeesi	raeesi	PROPN
fuelectenerg-7534	736	6	,	,	PUNCT
fuelectenerg-7534	736	7	h.	h.	PROPN
fuelectenerg-7534	736	8	al	al	PROPN
fuelectenerg-7534	736	9	-	-	PUNCT
fuelectenerg-7534	736	10	saedi	saedi	PROPN
fuelectenerg-7534	736	11	,	,	PUNCT
fuelectenerg-7534	736	12	a.	a.	NOUN
fuelectenerg-7534	736	13	palizban	palizban	PROPN
fuelectenerg-7534	736	14	,	,	PUNCT
fuelectenerg-7534	736	15	a.	a.	NOUN
fuelectenerg-7534	736	16	taeb	taeb	PROPN
fuelectenerg-7534	736	17	,	,	PUNCT
fuelectenerg-7534	736	18	w.	w.	PROPN
fuelectenerg-7534	736	19	m.	m.	PROPN
fuelectenerg-7534	736	20	abdel	abdel	PROPN
fuelectenerg-7534	736	21	-	-	PUNCT
fuelectenerg-7534	736	22	wahab	wahab	PROPN
fuelectenerg-7534	736	23	,	,	PUNCT
fuelectenerg-7534	736	24	s.	s.	PROPN
fuelectenerg-7534	736	25	gigoyan	gigoyan	PROPN
fuelectenerg-7534	736	26	,	,	PUNCT
fuelectenerg-7534	736	27	and	and	CCONJ
fuelectenerg-7534	736	28	s.	s.	PROPN
fuelectenerg-7534	736	29	safavi	safavi	PROPN
fuelectenerg-7534	736	30	-	-	PUNCT
fuelectenerg-7534	736	31	naeini	naeini	NOUN
fuelectenerg-7534	736	32	,	,	PUNCT
fuelectenerg-7534	736	33	“	"	PUNCT
fuelectenerg-7534	736	34	low	low	ADJ
fuelectenerg-7534	736	35	-	-	PUNCT
fuelectenerg-7534	736	36	cost	cost	NOUN
fuelectenerg-7534	736	37	planar	planar	ADJ
fuelectenerg-7534	736	38	rf	rf	NOUN
fuelectenerg-7534	736	39	mems	mem	NOUN
fuelectenerg-7534	736	40	-	-	PUNCT
fuelectenerg-7534	736	41	based	base	VERB
fuelectenerg-7534	736	42	attenuator	attenuator	NOUN
fuelectenerg-7534	736	43	”	"	PUNCT
fuelectenerg-7534	736	44	,	,	PUNCT
fuelectenerg-7534	736	45	in	in	ADP
fuelectenerg-7534	736	46	proceedings	proceeding	NOUN
fuelectenerg-7534	736	47	of	of	ADP
fuelectenerg-7534	736	48	the	the	DET
fuelectenerg-7534	736	49	ieee	ieee	NOUN
fuelectenerg-7534	736	50	mtt	mtt	PROPN
fuelectenerg-7534	736	51	-	-	PUNCT
fuelectenerg-7534	736	52	s	s	NOUN
fuelectenerg-7534	736	53	international	international	ADJ
fuelectenerg-7534	736	54	microwave	microwave	NOUN
fuelectenerg-7534	736	55	symposium	symposium	NOUN
fuelectenerg-7534	736	56	(	(	PUNCT
fuelectenerg-7534	736	57	ims	im	NOUN
fuelectenerg-7534	736	58	)	)	PUNCT
fuelectenerg-7534	736	59	,	,	PUNCT
fuelectenerg-7534	736	60	2019	2019	NUM
fuelectenerg-7534	736	61	,	,	PUNCT
fuelectenerg-7534	736	62	pp	pp	ADJ
fuelectenerg-7534	736	63	.	.	PUNCT
fuelectenerg-7534	737	1	869–872	869–872	NUM
fuelectenerg-7534	737	2	.	.	PUNCT
fuelectenerg-7534	738	1	[	[	X
fuelectenerg-7534	738	2	99	99	NUM
fuelectenerg-7534	738	3	]	]	X
fuelectenerg-7534	738	4	n.	n.	PROPN
fuelectenerg-7534	738	5	k.	k.	PROPN
fuelectenerg-7534	738	6	khaira	khaira	PROPN
fuelectenerg-7534	738	7	,	,	PUNCT
fuelectenerg-7534	738	8	t.	t.	PROPN
fuelectenerg-7534	738	9	singh	singh	PROPN
fuelectenerg-7534	738	10	,	,	PUNCT
fuelectenerg-7534	738	11	and	and	CCONJ
fuelectenerg-7534	738	12	r.	r.	PROPN
fuelectenerg-7534	738	13	r.	r.	PROPN
fuelectenerg-7534	738	14	mansour	mansour	PROPN
fuelectenerg-7534	738	15	,	,	PUNCT
fuelectenerg-7534	738	16	“	"	PUNCT
fuelectenerg-7534	738	17	rf	rf	ADJ
fuelectenerg-7534	738	18	mems	mem	NOUN
fuelectenerg-7534	738	19	based	base	VERB
fuelectenerg-7534	738	20	60	60	NUM
fuelectenerg-7534	738	21	ghz	ghz	NOUN
fuelectenerg-7534	738	22	variable	variable	ADJ
fuelectenerg-7534	738	23	attenuator	attenuator	NOUN
fuelectenerg-7534	738	24	”	"	PUNCT
fuelectenerg-7534	738	25	,	,	PUNCT
fuelectenerg-7534	738	26	in	in	ADP
fuelectenerg-7534	738	27	proceedings	proceeding	NOUN
fuelectenerg-7534	738	28	of	of	ADP
fuelectenerg-7534	738	29	the	the	DET
fuelectenerg-7534	738	30	ieee	ieee	NOUN
fuelectenerg-7534	738	31	mtt	mtt	PROPN
fuelectenerg-7534	738	32	-	-	PUNCT
fuelectenerg-7534	738	33	s	s	NOUN
fuelectenerg-7534	738	34	international	international	ADJ
fuelectenerg-7534	738	35	microwave	microwave	NOUN
fuelectenerg-7534	738	36	workshop	workshop	NOUN
fuelectenerg-7534	738	37	series	series	NOUN
fuelectenerg-7534	738	38	on	on	ADP
fuelectenerg-7534	738	39	advanced	advanced	ADJ
fuelectenerg-7534	738	40	materials	material	NOUN
fuelectenerg-7534	738	41	and	and	CCONJ
fuelectenerg-7534	738	42	processes	process	NOUN
fuelectenerg-7534	738	43	for	for	ADP
fuelectenerg-7534	738	44	rf	rf	ADJ
fuelectenerg-7534	738	45	and	and	CCONJ
fuelectenerg-7534	738	46	thz	thz	ADJ
fuelectenerg-7534	738	47	applications	application	NOUN
fuelectenerg-7534	738	48	(	(	PUNCT
fuelectenerg-7534	738	49	imws	imws	NOUN
fuelectenerg-7534	738	50	-	-	PUNCT
fuelectenerg-7534	738	51	amp	amp	NOUN
fuelectenerg-7534	738	52	)	)	PUNCT
fuelectenerg-7534	738	53	,	,	PUNCT
fuelectenerg-7534	738	54	2018	2018	NUM
fuelectenerg-7534	738	55	,	,	PUNCT
fuelectenerg-7534	738	56	pp	pp	ADJ
fuelectenerg-7534	738	57	.	.	PUNCT
fuelectenerg-7534	739	1	1–3	1–3	NOUN
fuelectenerg-7534	739	2	.	.	PUNCT
fuelectenerg-7534	740	1	[	[	X
fuelectenerg-7534	740	2	100	100	NUM
fuelectenerg-7534	740	3	]	]	PUNCT
fuelectenerg-7534	740	4	x.	x.	NOUN
fuelectenerg-7534	740	5	liu	liu	PROPN
fuelectenerg-7534	740	6	,	,	PUNCT
fuelectenerg-7534	740	7	“	"	PUNCT
fuelectenerg-7534	740	8	tunable	tunable	ADJ
fuelectenerg-7534	740	9	rf	rf	NOUN
fuelectenerg-7534	740	10	and	and	CCONJ
fuelectenerg-7534	740	11	microwave	microwave	NOUN
fuelectenerg-7534	740	12	filters	filter	NOUN
fuelectenerg-7534	740	13	”	"	PUNCT
fuelectenerg-7534	740	14	,	,	PUNCT
fuelectenerg-7534	740	15	in	in	ADP
fuelectenerg-7534	740	16	proceedings	proceeding	NOUN
fuelectenerg-7534	740	17	of	of	ADP
fuelectenerg-7534	740	18	the	the	DET
fuelectenerg-7534	740	19	ieee	ieee	NOUN
fuelectenerg-7534	740	20	16th	16th	NOUN
fuelectenerg-7534	740	21	annual	annual	ADJ
fuelectenerg-7534	740	22	wireless	wireless	NOUN
fuelectenerg-7534	740	23	and	and	CCONJ
fuelectenerg-7534	740	24	microwave	microwave	NOUN
fuelectenerg-7534	740	25	technology	technology	NOUN
fuelectenerg-7534	740	26	conference	conference	NOUN
fuelectenerg-7534	740	27	(	(	PUNCT
fuelectenerg-7534	740	28	wamicon	wamicon	PROPN
fuelectenerg-7534	740	29	)	)	PUNCT
fuelectenerg-7534	740	30	,	,	PUNCT
fuelectenerg-7534	740	31	2018	2018	NUM
fuelectenerg-7534	740	32	,	,	PUNCT
fuelectenerg-7534	740	33	pp	pp	ADP
fuelectenerg-7534	740	34	1–5	1–5	NUM
fuelectenerg-7534	740	35	.	.	PUNCT
fuelectenerg-7534	741	1	[	[	X
fuelectenerg-7534	741	2	101	101	NUM
fuelectenerg-7534	741	3	]	]	PUNCT
fuelectenerg-7534	741	4	a.	a.	NOUN
fuelectenerg-7534	741	5	jaimes	jaimes	PROPN
fuelectenerg-7534	741	6	-	-	PUNCT
fuelectenerg-7534	741	7	vera	vera	PROPN
fuelectenerg-7534	741	8	,	,	PUNCT
fuelectenerg-7534	741	9	i.	i.	NOUN
fuelectenerg-7534	741	10	llamas	llamas	PROPN
fuelectenerg-7534	741	11	-	-	PUNCT
fuelectenerg-7534	741	12	garro	garro	ADJ
fuelectenerg-7534	741	13	,	,	PUNCT
fuelectenerg-7534	741	14	a.	a.	NOUN
fuelectenerg-7534	741	15	corona	corona	PROPN
fuelectenerg-7534	741	16	-	-	PUNCT
fuelectenerg-7534	741	17	chavez	chavez	PROPN
fuelectenerg-7534	741	18	,	,	PUNCT
fuelectenerg-7534	741	19	and	and	CCONJ
fuelectenerg-7534	741	20	i.	i.	PROPN
fuelectenerg-7534	741	21	zaldivar	zaldivar	PROPN
fuelectenerg-7534	741	22	-	-	PUNCT
fuelectenerg-7534	741	23	huerta	huerta	PROPN
fuelectenerg-7534	741	24	,	,	PUNCT
fuelectenerg-7534	741	25	“	"	PUNCT
fuelectenerg-7534	741	26	review	review	NOUN
fuelectenerg-7534	741	27	on	on	ADP
fuelectenerg-7534	741	28	microwave	microwave	NOUN
fuelectenerg-7534	741	29	and	and	CCONJ
fuelectenerg-7534	741	30	millimeter	millimeter	NOUN
fuelectenerg-7534	741	31	filters	filter	NOUN
fuelectenerg-7534	741	32	using	use	VERB
fuelectenerg-7534	741	33	mems	mem	NOUN
fuelectenerg-7534	741	34	technology	technology	NOUN
fuelectenerg-7534	741	35	”	"	PUNCT
fuelectenerg-7534	741	36	,	,	PUNCT
fuelectenerg-7534	741	37	in	in	ADP
fuelectenerg-7534	741	38	proceedings	proceeding	NOUN
fuelectenerg-7534	741	39	of	of	ADP
fuelectenerg-7534	741	40	the	the	DET
fuelectenerg-7534	741	41	17th	17th	ADJ
fuelectenerg-7534	741	42	international	international	ADJ
fuelectenerg-7534	741	43	conference	conference	NOUN
fuelectenerg-7534	741	44	on	on	ADP
fuelectenerg-7534	741	45	electronics	electronic	NOUN
fuelectenerg-7534	741	46	,	,	PUNCT
fuelectenerg-7534	741	47	communications	communication	NOUN
fuelectenerg-7534	741	48	and	and	CCONJ
fuelectenerg-7534	741	49	computers	computer	NOUN
fuelectenerg-7534	741	50	(	(	PUNCT
fuelectenerg-7534	741	51	conielecomp'07	conielecomp'07	NOUN
fuelectenerg-7534	741	52	)	)	PUNCT
fuelectenerg-7534	741	53	,	,	PUNCT
fuelectenerg-7534	741	54	2007	2007	NUM
fuelectenerg-7534	741	55	,	,	PUNCT
fuelectenerg-7534	741	56	pp	pp	ADJ
fuelectenerg-7534	741	57	.	.	PUNCT
fuelectenerg-7534	742	1	26–30	26–30	NUM
fuelectenerg-7534	742	2	.	.	PUNCT
fuelectenerg-7534	743	1	[	[	X
fuelectenerg-7534	743	2	102	102	NUM
fuelectenerg-7534	743	3	]	]	X
fuelectenerg-7534	743	4	k.	k.	PROPN
fuelectenerg-7534	743	5	thialagavthi	thialagavthi	PROPN
fuelectenerg-7534	743	6	and	and	CCONJ
fuelectenerg-7534	743	7	m.	m.	NOUN
fuelectenerg-7534	743	8	balakumar	balakumar	PROPN
fuelectenerg-7534	743	9	,	,	PUNCT
fuelectenerg-7534	743	10	“	"	PUNCT
fuelectenerg-7534	743	11	review	review	NOUN
fuelectenerg-7534	743	12	on	on	ADP
fuelectenerg-7534	743	13	rf	rf	PRON
fuelectenerg-7534	743	14	tunable	tunable	ADJ
fuelectenerg-7534	743	15	filters	filter	NOUN
fuelectenerg-7534	743	16	”	"	PUNCT
fuelectenerg-7534	743	17	,	,	PUNCT
fuelectenerg-7534	743	18	international	international	ADJ
fuelectenerg-7534	743	19	journal	journal	NOUN
fuelectenerg-7534	743	20	of	of	ADP
fuelectenerg-7534	743	21	innovations	innovation	NOUN
fuelectenerg-7534	743	22	in	in	ADP
fuelectenerg-7534	743	23	engineering	engineering	NOUN
fuelectenerg-7534	743	24	and	and	CCONJ
fuelectenerg-7534	743	25	technology	technology	NOUN
fuelectenerg-7534	743	26	(	(	PUNCT
fuelectenerg-7534	743	27	ijiet	ijiet	NOUN
fuelectenerg-7534	743	28	)	)	PUNCT
fuelectenerg-7534	743	29	,	,	PUNCT
fuelectenerg-7534	743	30	04	04	NUM
fuelectenerg-7534	743	31	2017	2017	NUM
fuelectenerg-7534	743	32	.	.	PUNCT
fuelectenerg-7534	744	1	[	[	X
fuelectenerg-7534	744	2	103	103	NUM
fuelectenerg-7534	744	3	]	]	X
fuelectenerg-7534	744	4	f.	f.	PROPN
fuelectenerg-7534	744	5	lin	lin	PROPN
fuelectenerg-7534	744	6	and	and	CCONJ
fuelectenerg-7534	744	7	m.	m.	PROPN
fuelectenerg-7534	744	8	rais	rais	PROPN
fuelectenerg-7534	744	9	-	-	PUNCT
fuelectenerg-7534	744	10	zadeh	zadeh	PROPN
fuelectenerg-7534	744	11	,	,	PUNCT
fuelectenerg-7534	744	12	“	"	PUNCT
fuelectenerg-7534	744	13	tunable	tunable	ADJ
fuelectenerg-7534	744	14	rf	rf	ADJ
fuelectenerg-7534	744	15	mems	mem	NOUN
fuelectenerg-7534	744	16	filters	filter	NOUN
fuelectenerg-7534	744	17	:	:	PUNCT
fuelectenerg-7534	744	18	a	a	DET
fuelectenerg-7534	744	19	review	review	NOUN
fuelectenerg-7534	744	20	”	"	PUNCT
fuelectenerg-7534	744	21	,	,	PUNCT
fuelectenerg-7534	744	22	encyclopedia	encyclopedia	NOUN
fuelectenerg-7534	744	23	of	of	ADP
fuelectenerg-7534	744	24	nanotechnology	nanotechnology	NOUN
fuelectenerg-7534	744	25	,	,	PUNCT
fuelectenerg-7534	744	26	pp	pp	ADP
fuelectenerg-7534	744	27	.	.	PUNCT
fuelectenerg-7534	745	1	4233–4243	4233–4243	NUM
fuelectenerg-7534	745	2	,	,	PUNCT
fuelectenerg-7534	745	3	01	01	NUM
fuelectenerg-7534	745	4	2016	2016	NUM
fuelectenerg-7534	745	5	.	.	PUNCT
fuelectenerg-7534	746	1	[	[	X
fuelectenerg-7534	746	2	104	104	X
fuelectenerg-7534	746	3	]	]	X
fuelectenerg-7534	746	4	j.	j.	PROPN
fuelectenerg-7534	746	5	brank	brank	PROPN
fuelectenerg-7534	746	6	,	,	PUNCT
fuelectenerg-7534	746	7	j.	j.	PROPN
fuelectenerg-7534	746	8	yao	yao	PROPN
fuelectenerg-7534	746	9	,	,	PUNCT
fuelectenerg-7534	746	10	m.	m.	PROPN
fuelectenerg-7534	746	11	eberly	eberly	PROPN
fuelectenerg-7534	746	12	,	,	PUNCT
fuelectenerg-7534	746	13	a.	a.	PROPN
fuelectenerg-7534	746	14	malczewski	malczewski	PROPN
fuelectenerg-7534	746	15	,	,	PUNCT
fuelectenerg-7534	746	16	k.	k.	PROPN
fuelectenerg-7534	746	17	varian	varian	PROPN
fuelectenerg-7534	746	18	,	,	PUNCT
fuelectenerg-7534	746	19	and	and	CCONJ
fuelectenerg-7534	746	20	c.	c.	PROPN
fuelectenerg-7534	746	21	goldsmith	goldsmith	PROPN
fuelectenerg-7534	746	22	,	,	PUNCT
fuelectenerg-7534	746	23	“	"	PUNCT
fuelectenerg-7534	746	24	rf	rf	ADJ
fuelectenerg-7534	746	25	mems	mem	NOUN
fuelectenerg-7534	746	26	-	-	PUNCT
fuelectenerg-7534	746	27	based	base	VERB
fuelectenerg-7534	746	28	tunable	tunable	NOUN
fuelectenerg-7534	746	29	filters	filter	NOUN
fuelectenerg-7534	746	30	”	"	PUNCT
fuelectenerg-7534	746	31	,	,	PUNCT
fuelectenerg-7534	746	32	international	international	ADJ
fuelectenerg-7534	746	33	journal	journal	NOUN
fuelectenerg-7534	746	34	of	of	ADP
fuelectenerg-7534	746	35	rf	rf	NOUN
fuelectenerg-7534	746	36	and	and	CCONJ
fuelectenerg-7534	746	37	microwave	microwave	NOUN
fuelectenerg-7534	746	38	computer	computer	NOUN
fuelectenerg-7534	746	39	-	-	PUNCT
fuelectenerg-7534	746	40	aided	aid	VERB
fuelectenerg-7534	746	41	engineering	engineering	NOUN
fuelectenerg-7534	746	42	,	,	PUNCT
fuelectenerg-7534	746	43	vol	vol	NOUN
fuelectenerg-7534	746	44	.	.	PROPN
fuelectenerg-7534	746	45	11	11	NUM
fuelectenerg-7534	746	46	,	,	PUNCT
fuelectenerg-7534	746	47	no	no	INTJ
fuelectenerg-7534	746	48	.	.	NOUN
fuelectenerg-7534	746	49	5	5	NUM
fuelectenerg-7534	746	50	,	,	PUNCT
fuelectenerg-7534	746	51	pp	pp	ADJ
fuelectenerg-7534	746	52	.	.	PUNCT
fuelectenerg-7534	747	1	276–284	276–284	NUM
fuelectenerg-7534	747	2	,	,	PUNCT
fuelectenerg-7534	747	3	2001	2001	NUM
fuelectenerg-7534	747	4	.	.	PUNCT
fuelectenerg-7534	748	1	[	[	X
fuelectenerg-7534	748	2	105	105	NUM
fuelectenerg-7534	748	3	]	]	PUNCT
fuelectenerg-7534	748	4	z.	z.	PROPN
fuelectenerg-7534	748	5	brito	brito	PROPN
fuelectenerg-7534	748	6	-	-	PUNCT
fuelectenerg-7534	748	7	brito	brito	PROPN
fuelectenerg-7534	748	8	,	,	PUNCT
fuelectenerg-7534	748	9	j.	j.	PROPN
fuelectenerg-7534	748	10	reyes	reyes	PROPN
fuelectenerg-7534	748	11	,	,	PUNCT
fuelectenerg-7534	748	12	and	and	CCONJ
fuelectenerg-7534	748	13	i.	i.	PROPN
fuelectenerg-7534	748	14	llamas	llamas	PROPN
fuelectenerg-7534	748	15	-	-	PUNCT
fuelectenerg-7534	748	16	garro	garro	ADJ
fuelectenerg-7534	748	17	,	,	PUNCT
fuelectenerg-7534	748	18	“	"	PUNCT
fuelectenerg-7534	748	19	recent	recent	ADJ
fuelectenerg-7534	748	20	advances	advance	NOUN
fuelectenerg-7534	748	21	in	in	ADP
fuelectenerg-7534	748	22	reconfigurable	reconfigurable	ADJ
fuelectenerg-7534	748	23	microwave	microwave	NOUN
fuelectenerg-7534	748	24	filters	filter	NOUN
fuelectenerg-7534	748	25	”	"	PUNCT
fuelectenerg-7534	748	26	,	,	PUNCT
fuelectenerg-7534	748	27	sbmo	sbmo	NOUN
fuelectenerg-7534	748	28	/	/	SYM
fuelectenerg-7534	748	29	ieee	ieee	NOUN
fuelectenerg-7534	748	30	mtt	mtt	PROPN
fuelectenerg-7534	748	31	-	-	PUNCT
fuelectenerg-7534	748	32	s	s	NOUN
fuelectenerg-7534	748	33	international	international	ADJ
fuelectenerg-7534	748	34	microwave	microwave	NOUN
fuelectenerg-7534	748	35	and	and	CCONJ
fuelectenerg-7534	748	36	optoelectronics	optoelectronic	NOUN
fuelectenerg-7534	748	37	conference	conference	NOUN
fuelectenerg-7534	748	38	proceedings	proceeding	NOUN
fuelectenerg-7534	748	39	,	,	PUNCT
fuelectenerg-7534	748	40	10	10	NUM
fuelectenerg-7534	748	41	2011	2011	NUM
fuelectenerg-7534	748	42	.	.	PUNCT
fuelectenerg-7534	749	1	[	[	X
fuelectenerg-7534	749	2	106	106	NUM
fuelectenerg-7534	749	3	]	]	X
fuelectenerg-7534	749	4	l.	l.	PROPN
fuelectenerg-7534	749	5	pelliccia	pelliccia	PROPN
fuelectenerg-7534	749	6	,	,	PUNCT
fuelectenerg-7534	749	7	f.	f.	PROPN
fuelectenerg-7534	749	8	cacciamani	cacciamani	PROPN
fuelectenerg-7534	749	9	,	,	PUNCT
fuelectenerg-7534	749	10	p.	p.	NOUN
fuelectenerg-7534	749	11	farinelli	farinelli	PROPN
fuelectenerg-7534	749	12	,	,	PUNCT
fuelectenerg-7534	749	13	and	and	CCONJ
fuelectenerg-7534	749	14	r.	r.	PROPN
fuelectenerg-7534	749	15	sorrentino	sorrentino	PROPN
fuelectenerg-7534	749	16	,	,	PUNCT
fuelectenerg-7534	749	17	“	"	PUNCT
fuelectenerg-7534	749	18	high	high	ADJ
fuelectenerg-7534	749	19	-	-	PUNCT
fuelectenerg-7534	749	20	q	q	NOUN
fuelectenerg-7534	749	21	tunable	tunable	NOUN
fuelectenerg-7534	749	22	waveguide	waveguide	ADJ
fuelectenerg-7534	749	23	filters	filter	NOUN
fuelectenerg-7534	749	24	using	use	VERB
fuelectenerg-7534	749	25	ohmic	ohmic	ADJ
fuelectenerg-7534	749	26	rf	rf	NOUN
fuelectenerg-7534	749	27	mems	mem	NOUN
fuelectenerg-7534	749	28	switches	switch	NOUN
fuelectenerg-7534	749	29	”	"	PUNCT
fuelectenerg-7534	749	30	,	,	PUNCT
fuelectenerg-7534	749	31	ieee	ieee	NOUN
fuelectenerg-7534	749	32	transactions	transaction	NOUN
fuelectenerg-7534	749	33	on	on	ADP
fuelectenerg-7534	749	34	microwave	microwave	NOUN
fuelectenerg-7534	749	35	theory	theory	NOUN
fuelectenerg-7534	749	36	and	and	CCONJ
fuelectenerg-7534	749	37	techniques	technique	NOUN
fuelectenerg-7534	749	38	,	,	PUNCT
fuelectenerg-7534	749	39	vol	vol	NOUN
fuelectenerg-7534	749	40	.	.	PROPN
fuelectenerg-7534	749	41	63	63	NUM
fuelectenerg-7534	749	42	,	,	PUNCT
fuelectenerg-7534	749	43	10	10	NUM
fuelectenerg-7534	749	44	,	,	PUNCT
fuelectenerg-7534	749	45	pp	pp	ADJ
fuelectenerg-7534	749	46	.	.	PUNCT
fuelectenerg-7534	749	47	3381–3390	3381–3390	NUM
fuelectenerg-7534	749	48	,	,	PUNCT
fuelectenerg-7534	749	49	2015	2015	NUM
fuelectenerg-7534	749	50	.	.	PUNCT
fuelectenerg-7534	750	1	[	[	X
fuelectenerg-7534	750	2	107	107	X
fuelectenerg-7534	750	3	]	]	PUNCT
fuelectenerg-7534	750	4	l.	l.	PROPN
fuelectenerg-7534	750	5	gong	gong	PROPN
fuelectenerg-7534	750	6	,	,	PUNCT
fuelectenerg-7534	750	7	k.	k.	PROPN
fuelectenerg-7534	750	8	y.	y.	PROPN
fuelectenerg-7534	750	9	chan	chan	PROPN
fuelectenerg-7534	750	10	,	,	PUNCT
fuelectenerg-7534	750	11	and	and	CCONJ
fuelectenerg-7534	750	12	r.	r.	PROPN
fuelectenerg-7534	750	13	ramer	ramer	PROPN
fuelectenerg-7534	750	14	,	,	PUNCT
fuelectenerg-7534	750	15	“	"	PUNCT
fuelectenerg-7534	750	16	a	a	DET
fuelectenerg-7534	750	17	four	four	NUM
fuelectenerg-7534	750	18	-	-	PUNCT
fuelectenerg-7534	750	19	state	state	NOUN
fuelectenerg-7534	750	20	iris	iris	NOUN
fuelectenerg-7534	750	21	waveguide	waveguide	ADJ
fuelectenerg-7534	750	22	bandpass	bandpass	NOUN
fuelectenerg-7534	750	23	filter	filter	NOUN
fuelectenerg-7534	750	24	with	with	ADP
fuelectenerg-7534	750	25	switchable	switchable	ADJ
fuelectenerg-7534	750	26	irises	iris	NOUN
fuelectenerg-7534	750	27	”	"	PUNCT
fuelectenerg-7534	750	28	,	,	PUNCT
fuelectenerg-7534	750	29	2017	2017	NUM
fuelectenerg-7534	750	30	ieee	ieee	NOUN
fuelectenerg-7534	750	31	mtt	mtt	PROPN
fuelectenerg-7534	750	32	-	-	PUNCT
fuelectenerg-7534	750	33	s	s	NOUN
fuelectenerg-7534	750	34	international	international	ADJ
fuelectenerg-7534	750	35	microwave	microwave	NOUN
fuelectenerg-7534	750	36	symposium	symposium	NOUN
fuelectenerg-7534	750	37	(	(	PUNCT
fuelectenerg-7534	750	38	ims	im	NOUN
fuelectenerg-7534	750	39	)	)	PUNCT
fuelectenerg-7534	750	40	,	,	PUNCT
fuelectenerg-7534	750	41	2017	2017	NUM
fuelectenerg-7534	750	42	,	,	PUNCT
fuelectenerg-7534	750	43	pp	pp	ADJ
fuelectenerg-7534	750	44	.	.	PUNCT
fuelectenerg-7534	751	1	260–263	260–263	NUM
fuelectenerg-7534	751	2	.	.	PUNCT
fuelectenerg-7534	752	1	[	[	X
fuelectenerg-7534	752	2	108	108	NUM
fuelectenerg-7534	752	3	]	]	PUNCT
fuelectenerg-7534	752	4	z.	z.	PROPN
fuelectenerg-7534	752	5	yang	yang	PROPN
fuelectenerg-7534	752	6	and	and	CCONJ
fuelectenerg-7534	752	7	d.	d.	PROPN
fuelectenerg-7534	752	8	peroulis	peroulis	PROPN
fuelectenerg-7534	752	9	,	,	PUNCT
fuelectenerg-7534	752	10	“	"	PUNCT
fuelectenerg-7534	752	11	a	a	DET
fuelectenerg-7534	752	12	20{40	20{40	NUM
fuelectenerg-7534	752	13	ghz	ghz	NOUN
fuelectenerg-7534	752	14	tunable	tunable	NOUN
fuelectenerg-7534	752	15	mems	mem	NOUN
fuelectenerg-7534	752	16	bandpass	bandpass	NOUN
fuelectenerg-7534	752	17	filter	filter	NOUN
fuelectenerg-7534	752	18	with	with	ADP
fuelectenerg-7534	752	19	enhanced	enhanced	ADJ
fuelectenerg-7534	752	20	stability	stability	NOUN
fuelectenerg-7534	752	21	by	by	ADP
fuelectenerg-7534	752	22	goldvanadium	goldvanadium	PROPN
fuelectenerg-7534	752	23	micro	micro	PROPN
fuelectenerg-7534	752	24	-	-	ADJ
fuelectenerg-7534	752	25	corrugated	corrugate	VERB
fuelectenerg-7534	752	26	diaphragms	diaphragm	NOUN
fuelectenerg-7534	752	27	”	"	PUNCT
fuelectenerg-7534	752	28	,	,	PUNCT
fuelectenerg-7534	752	29	in	in	ADP
fuelectenerg-7534	752	30	proceedings	proceeding	NOUN
fuelectenerg-7534	752	31	of	of	ADP
fuelectenerg-7534	752	32	the	the	DET
fuelectenerg-7534	752	33	ieee	ieee	NOUN
fuelectenerg-7534	752	34	mtt	mtt	PROPN
fuelectenerg-7534	752	35	-	-	PUNCT
fuelectenerg-7534	752	36	s	s	NOUN
fuelectenerg-7534	752	37	international	international	ADJ
fuelectenerg-7534	752	38	microwave	microwave	NOUN
fuelectenerg-7534	752	39	symposium	symposium	NOUN
fuelectenerg-7534	752	40	(	(	PUNCT
fuelectenerg-7534	752	41	ims	im	NOUN
fuelectenerg-7534	752	42	)	)	PUNCT
fuelectenerg-7534	752	43	,	,	PUNCT
fuelectenerg-7534	752	44	2016	2016	NUM
fuelectenerg-7534	752	45	,	,	PUNCT
fuelectenerg-7534	752	46	pp	pp	ADP
fuelectenerg-7534	752	47	.	.	PUNCT
fuelectenerg-7534	753	1	1–3	1–3	X
fuelectenerg-7534	753	2	.	.	PUNCT
fuelectenerg-7534	754	1	[	[	X
fuelectenerg-7534	754	2	109	109	NUM
fuelectenerg-7534	754	3	]	]	PUNCT
fuelectenerg-7534	754	4	z.	z.	PROPN
fuelectenerg-7534	754	5	yang	yang	PROPN
fuelectenerg-7534	754	6	,	,	PUNCT
fuelectenerg-7534	754	7	d.	d.	PROPN
fuelectenerg-7534	754	8	psychogiou	psychogiou	PROPN
fuelectenerg-7534	754	9	,	,	PUNCT
fuelectenerg-7534	754	10	and	and	CCONJ
fuelectenerg-7534	754	11	d.	d.	PROPN
fuelectenerg-7534	754	12	peroulis	peroulis	PROPN
fuelectenerg-7534	754	13	,	,	PUNCT
fuelectenerg-7534	754	14	“	"	PUNCT
fuelectenerg-7534	754	15	design	design	NOUN
fuelectenerg-7534	754	16	and	and	CCONJ
fuelectenerg-7534	754	17	optimization	optimization	NOUN
fuelectenerg-7534	754	18	of	of	ADP
fuelectenerg-7534	754	19	tunable	tunable	ADJ
fuelectenerg-7534	754	20	silicon	silicon	NOUN
fuelectenerg-7534	754	21	-	-	PUNCT
fuelectenerg-7534	754	22	integrated	integrate	VERB
fuelectenerg-7534	754	23	evanescentmode	evanescentmode	NOUN
fuelectenerg-7534	754	24	bandpass	bandpass	NOUN
fuelectenerg-7534	754	25	filters	filter	NOUN
fuelectenerg-7534	754	26	”	"	PUNCT
fuelectenerg-7534	754	27	,	,	PUNCT
fuelectenerg-7534	754	28	ieee	ieee	NOUN
fuelectenerg-7534	754	29	transactions	transaction	NOUN
fuelectenerg-7534	754	30	on	on	ADP
fuelectenerg-7534	754	31	microwave	microwave	NOUN
fuelectenerg-7534	754	32	theory	theory	NOUN
fuelectenerg-7534	754	33	and	and	CCONJ
fuelectenerg-7534	754	34	techniques	technique	NOUN
fuelectenerg-7534	754	35	,	,	PUNCT
fuelectenerg-7534	754	36	vol	vol	NOUN
fuelectenerg-7534	754	37	.	.	PROPN
fuelectenerg-7534	755	1	66	66	NUM
fuelectenerg-7534	755	2	,	,	PUNCT
fuelectenerg-7534	755	3	no	no	INTJ
fuelectenerg-7534	755	4	.	.	NOUN
fuelectenerg-7534	755	5	4	4	NUM
fuelectenerg-7534	755	6	,	,	PUNCT
fuelectenerg-7534	755	7	pp	pp	ADJ
fuelectenerg-7534	755	8	.	.	PUNCT
fuelectenerg-7534	756	1	1790	1790	NUM
fuelectenerg-7534	756	2	–	–	PUNCT
fuelectenerg-7534	756	3	1803	1803	NUM
fuelectenerg-7534	756	4	,	,	PUNCT
fuelectenerg-7534	756	5	2018	2018	NUM
fuelectenerg-7534	756	6	.	.	PUNCT
fuelectenerg-7534	757	1	[	[	X
fuelectenerg-7534	757	2	110	110	NUM
fuelectenerg-7534	757	3	]	]	PUNCT
fuelectenerg-7534	757	4	m.	m.	NOUN
fuelectenerg-7534	757	5	abdelfattah	abdelfattah	PROPN
fuelectenerg-7534	757	6	,	,	PUNCT
fuelectenerg-7534	757	7	d.	d.	PROPN
fuelectenerg-7534	757	8	psychogiou	psychogiou	PROPN
fuelectenerg-7534	757	9	,	,	PUNCT
fuelectenerg-7534	757	10	z.	z.	PROPN
fuelectenerg-7534	757	11	yang	yang	PROPN
fuelectenerg-7534	757	12	,	,	PUNCT
fuelectenerg-7534	757	13	and	and	CCONJ
fuelectenerg-7534	757	14	d.	d.	PROPN
fuelectenerg-7534	757	15	peroulis	peroulis	PROPN
fuelectenerg-7534	757	16	,	,	PUNCT
fuelectenerg-7534	757	17	“	"	PUNCT
fuelectenerg-7534	757	18	v	v	ADJ
fuelectenerg-7534	757	19	-	-	PUNCT
fuelectenerg-7534	757	20	band	band	NOUN
fuelectenerg-7534	757	21	frequency	frequency	NOUN
fuelectenerg-7534	757	22	reconfigurable	reconfigurable	NOUN
fuelectenerg-7534	757	23	cavitybased	cavitybase	VERB
fuelectenerg-7534	757	24	bandpass	bandpass	NOUN
fuelectenerg-7534	757	25	filters	filter	NOUN
fuelectenerg-7534	757	26	”	"	PUNCT
fuelectenerg-7534	757	27	,	,	PUNCT
fuelectenerg-7534	757	28	in	in	ADP
fuelectenerg-7534	757	29	proceedings	proceeding	NOUN
fuelectenerg-7534	757	30	of	of	ADP
fuelectenerg-7534	757	31	the	the	DET
fuelectenerg-7534	757	32	2016	2016	NUM
fuelectenerg-7534	757	33	ieee	ieee	NOUN
fuelectenerg-7534	757	34	/	/	SYM
fuelectenerg-7534	757	35	aces	ace	NOUN
fuelectenerg-7534	757	36	international	international	ADJ
fuelectenerg-7534	757	37	conference	conference	NOUN
fuelectenerg-7534	757	38	on	on	ADP
fuelectenerg-7534	757	39	wireless	wireless	ADJ
fuelectenerg-7534	757	40	information	information	NOUN
fuelectenerg-7534	757	41	technology	technology	NOUN
fuelectenerg-7534	757	42	and	and	CCONJ
fuelectenerg-7534	757	43	systems	system	NOUN
fuelectenerg-7534	757	44	(	(	PUNCT
fuelectenerg-7534	757	45	icwits	icwits	ADJ
fuelectenerg-7534	757	46	)	)	PUNCT
fuelectenerg-7534	757	47	and	and	CCONJ
fuelectenerg-7534	757	48	applied	apply	VERB
fuelectenerg-7534	757	49	computational	computational	ADJ
fuelectenerg-7534	757	50	electromagnetics	electromagnetic	NOUN
fuelectenerg-7534	757	51	(	(	PUNCT
fuelectenerg-7534	757	52	aces	ace	NOUN
fuelectenerg-7534	757	53	)	)	PUNCT
fuelectenerg-7534	757	54	,	,	PUNCT
fuelectenerg-7534	757	55	2016	2016	NUM
fuelectenerg-7534	757	56	,	,	PUNCT
fuelectenerg-7534	757	57	pp	pp	ADV
fuelectenerg-7534	757	58	.	.	PUNCT
fuelectenerg-7534	758	1	1–2	1–2	X
fuelectenerg-7534	758	2	.	.	PUNCT
fuelectenerg-7534	759	1	[	[	X
fuelectenerg-7534	759	2	111	111	NUM
fuelectenerg-7534	759	3	]	]	PUNCT
fuelectenerg-7534	759	4	m.	m.	NOUN
fuelectenerg-7534	759	5	agaty	agaty	PROPN
fuelectenerg-7534	759	6	,	,	PUNCT
fuelectenerg-7534	759	7	a.	a.	NOUN
fuelectenerg-7534	759	8	crunteanu	crunteanu	PROPN
fuelectenerg-7534	759	9	,	,	PUNCT
fuelectenerg-7534	759	10	c.	c.	PROPN
fuelectenerg-7534	759	11	dalmay	dalmay	PROPN
fuelectenerg-7534	759	12	,	,	PUNCT
fuelectenerg-7534	759	13	and	and	CCONJ
fuelectenerg-7534	759	14	p.	p.	NOUN
fuelectenerg-7534	759	15	blondy	blondy	NOUN
fuelectenerg-7534	759	16	,	,	PUNCT
fuelectenerg-7534	759	17	“	"	PUNCT
fuelectenerg-7534	759	18	ku	ku	PROPN
fuelectenerg-7534	759	19	band	band	NOUN
fuelectenerg-7534	759	20	high	high	ADJ
fuelectenerg-7534	759	21	-	-	PUNCT
fuelectenerg-7534	759	22	q	q	NOUN
fuelectenerg-7534	759	23	tunable	tunable	NOUN
fuelectenerg-7534	759	24	cavity	cavity	NOUN
fuelectenerg-7534	759	25	filters	filter	NOUN
fuelectenerg-7534	759	26	using	use	VERB
fuelectenerg-7534	759	27	mems	mem	NOUN
fuelectenerg-7534	759	28	and	and	CCONJ
fuelectenerg-7534	759	29	vanadium	vanadium	NOUN
fuelectenerg-7534	759	30	dioxide	dioxide	NOUN
fuelectenerg-7534	759	31	(	(	PUNCT
fuelectenerg-7534	759	32	vo2	vo2	NOUN
fuelectenerg-7534	759	33	)	)	PUNCT
fuelectenerg-7534	759	34	tuners	tuner	NOUN
fuelectenerg-7534	759	35	”	"	PUNCT
fuelectenerg-7534	759	36	,	,	PUNCT
fuelectenerg-7534	759	37	in	in	ADP
fuelectenerg-7534	759	38	proceedings	proceeding	NOUN
fuelectenerg-7534	759	39	of	of	ADP
fuelectenerg-7534	759	40	the	the	DET
fuelectenerg-7534	759	41	2018	2018	NUM
fuelectenerg-7534	759	42	ieee	ieee	NOUN
fuelectenerg-7534	759	43	mtt	mtt	PROPN
fuelectenerg-7534	759	44	-	-	PUNCT
fuelectenerg-7534	759	45	s	s	NOUN
fuelectenerg-7534	759	46	international	international	ADJ
fuelectenerg-7534	759	47	microwave	microwave	NOUN
fuelectenerg-7534	759	48	workshop	workshop	NOUN
fuelectenerg-7534	759	49	series	series	NOUN
fuelectenerg-7534	759	50	on	on	ADP
fuelectenerg-7534	759	51	advanced	advanced	ADJ
fuelectenerg-7534	759	52	materials	material	NOUN
fuelectenerg-7534	759	53	and	and	CCONJ
fuelectenerg-7534	759	54	processes	process	NOUN
fuelectenerg-7534	759	55	for	for	ADP
fuelectenerg-7534	759	56	rf	rf	ADJ
fuelectenerg-7534	759	57	and	and	CCONJ
fuelectenerg-7534	759	58	thz	thz	ADJ
fuelectenerg-7534	759	59	applications	application	NOUN
fuelectenerg-7534	759	60	(	(	PUNCT
fuelectenerg-7534	759	61	imws	imws	NOUN
fuelectenerg-7534	759	62	-	-	PUNCT
fuelectenerg-7534	759	63	amp	amp	NOUN
fuelectenerg-7534	759	64	)	)	PUNCT
fuelectenerg-7534	759	65	,	,	PUNCT
fuelectenerg-7534	759	66	2018	2018	NUM
fuelectenerg-7534	759	67	,	,	PUNCT
fuelectenerg-7534	759	68	pp	pp	ADP
fuelectenerg-7534	759	69	1–3	1–3	NOUN
fuelectenerg-7534	759	70	.	.	PUNCT
fuelectenerg-7534	760	1	[	[	X
fuelectenerg-7534	760	2	112	112	NUM
fuelectenerg-7534	760	3	]	]	PUNCT
fuelectenerg-7534	760	4	j.	j.	PROPN
fuelectenerg-7534	760	5	chang	chang	PROPN
fuelectenerg-7534	760	6	,	,	PUNCT
fuelectenerg-7534	760	7	m.	m.	PROPN
fuelectenerg-7534	760	8	j.	j.	PROPN
fuelectenerg-7534	760	9	holyoak	holyoak	PROPN
fuelectenerg-7534	760	10	,	,	PUNCT
fuelectenerg-7534	760	11	g.	g.	PROPN
fuelectenerg-7534	760	12	k.	k.	PROPN
fuelectenerg-7534	760	13	kannell	kannell	PROPN
fuelectenerg-7534	760	14	,	,	PUNCT
fuelectenerg-7534	760	15	m.	m.	PROPN
fuelectenerg-7534	760	16	beacken	beacken	PROPN
fuelectenerg-7534	760	17	,	,	PUNCT
fuelectenerg-7534	760	18	m.	m.	NOUN
fuelectenerg-7534	760	19	imboden	imboden	PROPN
fuelectenerg-7534	760	20	,	,	PUNCT
fuelectenerg-7534	760	21	and	and	CCONJ
fuelectenerg-7534	760	22	d.	d.	PROPN
fuelectenerg-7534	760	23	j.	j.	PROPN
fuelectenerg-7534	760	24	bishop	bishop	PROPN
fuelectenerg-7534	760	25	,	,	PUNCT
fuelectenerg-7534	760	26	“	"	PUNCT
fuelectenerg-7534	760	27	high	high	ADJ
fuelectenerg-7534	760	28	performance	performance	NOUN
fuelectenerg-7534	760	29	,	,	PUNCT
fuelectenerg-7534	760	30	continuously	continuously	ADV
fuelectenerg-7534	760	31	tunable	tunable	ADJ
fuelectenerg-7534	760	32	microwave	microwave	NOUN
fuelectenerg-7534	760	33	filters	filter	NOUN
fuelectenerg-7534	760	34	using	use	VERB
fuelectenerg-7534	760	35	mems	mem	NOUN
fuelectenerg-7534	760	36	devices	device	NOUN
fuelectenerg-7534	760	37	with	with	ADP
fuelectenerg-7534	760	38	very	very	ADV
fuelectenerg-7534	760	39	large	large	ADJ
fuelectenerg-7534	760	40	,	,	PUNCT
fuelectenerg-7534	760	41	controlled	control	VERB
fuelectenerg-7534	760	42	,	,	PUNCT
fuelectenerg-7534	760	43	out	out	ADP
fuelectenerg-7534	760	44	-	-	PUNCT
fuelectenerg-7534	760	45	of	of	ADP
fuelectenerg-7534	760	46	-	-	PUNCT
fuelectenerg-7534	760	47	plane	plane	NOUN
fuelectenerg-7534	760	48	actuation	actuation	NOUN
fuelectenerg-7534	760	49	”	"	PUNCT
fuelectenerg-7534	760	50	,	,	PUNCT
fuelectenerg-7534	760	51	journal	journal	NOUN
fuelectenerg-7534	760	52	of	of	ADP
fuelectenerg-7534	760	53	microelectromechanical	microelectromechanical	ADJ
fuelectenerg-7534	760	54	systems	system	NOUN
fuelectenerg-7534	760	55	,	,	PUNCT
fuelectenerg-7534	760	56	vol	vol	NOUN
fuelectenerg-7534	760	57	.	.	PROPN
fuelectenerg-7534	760	58	27	27	NUM
fuelectenerg-7534	760	59	,	,	PUNCT
fuelectenerg-7534	760	60	no	no	INTJ
fuelectenerg-7534	760	61	.	.	NOUN
fuelectenerg-7534	760	62	6	6	NUM
fuelectenerg-7534	760	63	,	,	PUNCT
fuelectenerg-7534	760	64	pp	pp	ADJ
fuelectenerg-7534	760	65	.	.	PUNCT
fuelectenerg-7534	761	1	1135–1147	1135–1147	NUM
fuelectenerg-7534	761	2	,	,	PUNCT
fuelectenerg-7534	761	3	2018	2018	NUM
fuelectenerg-7534	761	4	.	.	PUNCT
fuelectenerg-7534	762	1	366	366	NUM
fuelectenerg-7534	762	2	g.	g.	NOUN
fuelectenerg-7534	762	3	tagliapietra	tagliapietra	PROPN
fuelectenerg-7534	762	4	,	,	PUNCT
fuelectenerg-7534	762	5	j.	j.	PROPN
fuelectenerg-7534	762	6	iannacci	iannacci	PROPN
fuelectenerg-7534	763	1	[	[	X
fuelectenerg-7534	763	2	113	113	NUM
fuelectenerg-7534	763	3	]	]	PUNCT
fuelectenerg-7534	763	4	j.	j.	PROPN
fuelectenerg-7534	763	5	jiang	jiang	PROPN
fuelectenerg-7534	763	6	and	and	CCONJ
fuelectenerg-7534	763	7	r.	r.	PROPN
fuelectenerg-7534	763	8	r.	r.	PROPN
fuelectenerg-7534	763	9	mansour	mansour	PROPN
fuelectenerg-7534	763	10	,	,	PUNCT
fuelectenerg-7534	763	11	“	"	PUNCT
fuelectenerg-7534	763	12	high	high	ADJ
fuelectenerg-7534	763	13	-	-	PUNCT
fuelectenerg-7534	763	14	q	q	NOUN
fuelectenerg-7534	763	15	tunable	tunable	ADJ
fuelectenerg-7534	763	16	filter	filter	NOUN
fuelectenerg-7534	763	17	with	with	ADP
fuelectenerg-7534	763	18	a	a	DET
fuelectenerg-7534	763	19	novel	novel	ADJ
fuelectenerg-7534	763	20	tuning	tuning	NOUN
fuelectenerg-7534	763	21	structure	structure	NOUN
fuelectenerg-7534	763	22	”	"	PUNCT
fuelectenerg-7534	763	23	,	,	PUNCT
fuelectenerg-7534	763	24	in	in	ADP
fuelectenerg-7534	763	25	proceedings	proceeding	NOUN
fuelectenerg-7534	763	26	of	of	ADP
fuelectenerg-7534	763	27	the	the	DET
fuelectenerg-7534	763	28	11th	11th	ADJ
fuelectenerg-7534	763	29	european	european	ADJ
fuelectenerg-7534	763	30	microwave	microwave	PROPN
fuelectenerg-7534	763	31	integrated	integrate	VERB
fuelectenerg-7534	763	32	circuits	circuit	NOUN
fuelectenerg-7534	763	33	conference	conference	NOUN
fuelectenerg-7534	763	34	(	(	PUNCT
fuelectenerg-7534	763	35	eumic	eumic	ADJ
fuelectenerg-7534	763	36	)	)	PUNCT
fuelectenerg-7534	763	37	,	,	PUNCT
fuelectenerg-7534	763	38	2016	2016	NUM
fuelectenerg-7534	763	39	,	,	PUNCT
fuelectenerg-7534	763	40	pp	pp	ADV
fuelectenerg-7534	763	41	.	.	PUNCT
fuelectenerg-7534	764	1	436–439	436–439	NUM
fuelectenerg-7534	764	2	,	,	PUNCT
fuelectenerg-7534	764	3	2016	2016	NUM
fuelectenerg-7534	764	4	.	.	PUNCT
fuelectenerg-7534	765	1	[	[	X
fuelectenerg-7534	765	2	114	114	NUM
fuelectenerg-7534	765	3	]	]	PUNCT
fuelectenerg-7534	765	4	t.	t.	PROPN
fuelectenerg-7534	765	5	r.	r.	PROPN
fuelectenerg-7534	765	6	jones	jones	PROPN
fuelectenerg-7534	765	7	and	and	CCONJ
fuelectenerg-7534	765	8	m.	m.	PROPN
fuelectenerg-7534	765	9	daneshmand	daneshmand	PROPN
fuelectenerg-7534	765	10	,	,	PUNCT
fuelectenerg-7534	765	11	“	"	PUNCT
fuelectenerg-7534	765	12	miniaturized	miniaturize	VERB
fuelectenerg-7534	765	13	folded	fold	VERB
fuelectenerg-7534	765	14	ridged	ridged	ADJ
fuelectenerg-7534	765	15	quarter	quarter	NOUN
fuelectenerg-7534	765	16	-	-	PUNCT
fuelectenerg-7534	765	17	mode	mode	NOUN
fuelectenerg-7534	765	18	substrate	substrate	NOUN
fuelectenerg-7534	765	19	integrated	integrate	VERB
fuelectenerg-7534	765	20	waveguide	waveguide	ADJ
fuelectenerg-7534	765	21	rf	rf	NOUN
fuelectenerg-7534	765	22	mems	mem	NOUN
fuelectenerg-7534	765	23	tunable	tunable	ADJ
fuelectenerg-7534	765	24	bandpass	bandpass	NOUN
fuelectenerg-7534	765	25	filter	filter	NOUN
fuelectenerg-7534	765	26	”	"	PUNCT
fuelectenerg-7534	765	27	,	,	PUNCT
fuelectenerg-7534	765	28	ieee	ieee	NOUN
fuelectenerg-7534	765	29	access	access	NOUN
fuelectenerg-7534	765	30	,	,	PUNCT
fuelectenerg-7534	765	31	vol	vol	NOUN
fuelectenerg-7534	765	32	.	.	PROPN
fuelectenerg-7534	765	33	8	8	NUM
fuelectenerg-7534	765	34	,	,	PUNCT
fuelectenerg-7534	765	35	pp	pp	ADJ
fuelectenerg-7534	765	36	.	.	PUNCT
fuelectenerg-7534	766	1	115837–115847	115837–115847	NUM
fuelectenerg-7534	766	2	,	,	PUNCT
fuelectenerg-7534	766	3	2020	2020	NUM
fuelectenerg-7534	766	4	.	.	PUNCT
fuelectenerg-7534	767	1	[	[	X
fuelectenerg-7534	767	2	115	115	NUM
fuelectenerg-7534	767	3	]	]	PUNCT
fuelectenerg-7534	767	4	s.	s.	PROPN
fuelectenerg-7534	767	5	shirin	shirin	PROPN
fuelectenerg-7534	767	6	saberhosseini	saberhosseini	PROPN
fuelectenerg-7534	767	7	,	,	PUNCT
fuelectenerg-7534	767	8	b.	b.	PROPN
fuelectenerg-7534	767	9	a.	a.	PROPN
fuelectenerg-7534	767	10	ganji	ganji	PROPN
fuelectenerg-7534	767	11	,	,	PUNCT
fuelectenerg-7534	767	12	and	and	CCONJ
fuelectenerg-7534	767	13	a.	a.	NOUN
fuelectenerg-7534	767	14	ghorbani	ghorbani	NOUN
fuelectenerg-7534	767	15	,	,	PUNCT
fuelectenerg-7534	767	16	“	"	PUNCT
fuelectenerg-7534	767	17	tunable	tunable	ADJ
fuelectenerg-7534	767	18	and	and	CCONJ
fuelectenerg-7534	767	19	dual	dual	ADJ
fuelectenerg-7534	767	20	-	-	PUNCT
fuelectenerg-7534	767	21	band	band	NOUN
fuelectenerg-7534	767	22	hmsiw	hmsiw	NOUN
fuelectenerg-7534	767	23	resonator	resonator	NOUN
fuelectenerg-7534	767	24	using	use	VERB
fuelectenerg-7534	767	25	rf	rf	VERB
fuelectenerg-7534	767	26	mems	mem	NOUN
fuelectenerg-7534	767	27	capacitor	capacitor	NOUN
fuelectenerg-7534	767	28	”	"	PUNCT
fuelectenerg-7534	767	29	,	,	PUNCT
fuelectenerg-7534	767	30	in	in	ADP
fuelectenerg-7534	767	31	proceedings	proceeding	NOUN
fuelectenerg-7534	767	32	of	of	ADP
fuelectenerg-7534	767	33	the	the	DET
fuelectenerg-7534	767	34	iranian	iranian	ADJ
fuelectenerg-7534	767	35	conference	conference	NOUN
fuelectenerg-7534	767	36	on	on	ADP
fuelectenerg-7534	767	37	electrical	electrical	ADJ
fuelectenerg-7534	767	38	engineering	engineering	NOUN
fuelectenerg-7534	767	39	(	(	PUNCT
fuelectenerg-7534	767	40	icee	icee	NOUN
fuelectenerg-7534	767	41	)	)	PUNCT
fuelectenerg-7534	767	42	,	,	PUNCT
fuelectenerg-7534	767	43	2017	2017	NUM
fuelectenerg-7534	767	44	,	,	PUNCT
fuelectenerg-7534	767	45	pp	pp	ADP
fuelectenerg-7534	767	46	279–282	279–282	NUM
fuelectenerg-7534	767	47	.	.	PUNCT
fuelectenerg-7534	768	1	[	[	X
fuelectenerg-7534	768	2	116	116	X
fuelectenerg-7534	768	3	]	]	X
fuelectenerg-7534	768	4	b.	b.	PROPN
fuelectenerg-7534	768	5	pradhan	pradhan	PROPN
fuelectenerg-7534	768	6	and	and	CCONJ
fuelectenerg-7534	768	7	b.	b.	PROPN
fuelectenerg-7534	768	8	gupta	gupta	PROPN
fuelectenerg-7534	768	9	,	,	PUNCT
fuelectenerg-7534	768	10	“	"	PUNCT
fuelectenerg-7534	768	11	ka	ka	ADJ
fuelectenerg-7534	768	12	-	-	PUNCT
fuelectenerg-7534	768	13	band	band	NOUN
fuelectenerg-7534	768	14	tunable	tunable	ADJ
fuelectenerg-7534	768	15	filter	filter	NOUN
fuelectenerg-7534	768	16	using	use	VERB
fuelectenerg-7534	768	17	metamaterials	metamaterial	NOUN
fuelectenerg-7534	768	18	and	and	CCONJ
fuelectenerg-7534	768	19	rf	rf	NOUN
fuelectenerg-7534	768	20	mems	mem	NOUN
fuelectenerg-7534	768	21	varactors	varactor	NOUN
fuelectenerg-7534	768	22	”	"	PUNCT
fuelectenerg-7534	768	23	,	,	PUNCT
fuelectenerg-7534	768	24	journal	journal	NOUN
fuelectenerg-7534	768	25	of	of	ADP
fuelectenerg-7534	768	26	microelectromechanical	microelectromechanical	ADJ
fuelectenerg-7534	768	27	systems	system	NOUN
fuelectenerg-7534	768	28	,	,	PUNCT
fuelectenerg-7534	768	29	vol	vol	NOUN
fuelectenerg-7534	768	30	.	.	PROPN
fuelectenerg-7534	768	31	24	24	NUM
fuelectenerg-7534	768	32	,	,	PUNCT
fuelectenerg-7534	768	33	no	no	INTJ
fuelectenerg-7534	768	34	.	.	NOUN
fuelectenerg-7534	768	35	5	5	NUM
fuelectenerg-7534	768	36	,	,	PUNCT
fuelectenerg-7534	768	37	pp	pp	ADJ
fuelectenerg-7534	768	38	.	.	PUNCT
fuelectenerg-7534	769	1	1453–1461	1453–1461	NUM
fuelectenerg-7534	769	2	,	,	PUNCT
fuelectenerg-7534	769	3	2015	2015	NUM
fuelectenerg-7534	769	4	.	.	PUNCT
fuelectenerg-7534	770	1	[	[	X
fuelectenerg-7534	770	2	117	117	NUM
fuelectenerg-7534	770	3	]	]	PUNCT
fuelectenerg-7534	770	4	r.	r.	PROPN
fuelectenerg-7534	770	5	kuriakose	kuriakose	PROPN
fuelectenerg-7534	770	6	and	and	CCONJ
fuelectenerg-7534	770	7	e.	e.	PROPN
fuelectenerg-7534	770	8	s.	s.	PROPN
fuelectenerg-7534	770	9	shajahan	shajahan	PROPN
fuelectenerg-7534	770	10	,	,	PUNCT
fuelectenerg-7534	770	11	“	"	PUNCT
fuelectenerg-7534	770	12	tunable	tunable	ADJ
fuelectenerg-7534	770	13	bandstop	bandstop	NOUN
fuelectenerg-7534	770	14	filter	filter	NOUN
fuelectenerg-7534	770	15	based	base	VERB
fuelectenerg-7534	770	16	on	on	ADP
fuelectenerg-7534	770	17	cascaded	cascade	VERB
fuelectenerg-7534	770	18	spiral	spiral	ADJ
fuelectenerg-7534	770	19	shaped	shape	VERB
fuelectenerg-7534	770	20	defected	defect	VERB
fuelectenerg-7534	770	21	ground	ground	NOUN
fuelectenerg-7534	770	22	plane	plane	NOUN
fuelectenerg-7534	770	23	cpw	cpw	NOUN
fuelectenerg-7534	770	24	”	"	PUNCT
fuelectenerg-7534	770	25	,	,	PUNCT
fuelectenerg-7534	770	26	in	in	ADP
fuelectenerg-7534	770	27	proceedings	proceeding	NOUN
fuelectenerg-7534	770	28	of	of	ADP
fuelectenerg-7534	770	29	the	the	DET
fuelectenerg-7534	770	30	international	international	ADJ
fuelectenerg-7534	770	31	conference	conference	NOUN
fuelectenerg-7534	770	32	on	on	ADP
fuelectenerg-7534	770	33	smart	smart	ADJ
fuelectenerg-7534	770	34	electronics	electronic	NOUN
fuelectenerg-7534	770	35	and	and	CCONJ
fuelectenerg-7534	770	36	communication	communication	NOUN
fuelectenerg-7534	770	37	(	(	PUNCT
fuelectenerg-7534	770	38	icosec	icosec	NOUN
fuelectenerg-7534	770	39	)	)	PUNCT
fuelectenerg-7534	770	40	,	,	PUNCT
fuelectenerg-7534	770	41	2020	2020	NUM
fuelectenerg-7534	770	42	,	,	PUNCT
fuelectenerg-7534	770	43	pp	pp	ADV
fuelectenerg-7534	770	44	.	.	PUNCT
fuelectenerg-7534	771	1	945–949	945–949	NUM
fuelectenerg-7534	771	2	.	.	PUNCT
fuelectenerg-7534	772	1	[	[	X
fuelectenerg-7534	772	2	118	118	NUM
fuelectenerg-7534	772	3	]	]	PUNCT
fuelectenerg-7534	772	4	k.	k.	PROPN
fuelectenerg-7534	772	5	n.	n.	PROPN
fuelectenerg-7534	772	6	jose	jose	PROPN
fuelectenerg-7534	772	7	and	and	CCONJ
fuelectenerg-7534	772	8	m.	m.	PROPN
fuelectenerg-7534	772	9	r.	r.	PROPN
fuelectenerg-7534	772	10	baiju	baiju	PROPN
fuelectenerg-7534	772	11	,	,	PUNCT
fuelectenerg-7534	772	12	“	"	PUNCT
fuelectenerg-7534	772	13	a	a	DET
fuelectenerg-7534	772	14	tunable	tunable	ADJ
fuelectenerg-7534	772	15	cpw	cpw	NOUN
fuelectenerg-7534	772	16	spurline	spurline	NOUN
fuelectenerg-7534	772	17	filter	filter	NOUN
fuelectenerg-7534	772	18	employing	employ	VERB
fuelectenerg-7534	772	19	distributed	distribute	VERB
fuelectenerg-7534	772	20	mems	mem	NOUN
fuelectenerg-7534	772	21	switches	switch	NOUN
fuelectenerg-7534	772	22	”	"	PUNCT
fuelectenerg-7534	772	23	,	,	PUNCT
fuelectenerg-7534	772	24	in	in	ADP
fuelectenerg-7534	772	25	proceedings	proceeding	NOUN
fuelectenerg-7534	772	26	of	of	ADP
fuelectenerg-7534	772	27	the	the	DET
fuelectenerg-7534	772	28	ieee	ieee	NOUN
fuelectenerg-7534	772	29	students	student	NOUN
fuelectenerg-7534	772	30	'	'	PART
fuelectenerg-7534	772	31	technology	technology	NOUN
fuelectenerg-7534	772	32	symposium	symposium	NOUN
fuelectenerg-7534	772	33	(	(	PUNCT
fuelectenerg-7534	772	34	techsym	techsym	PROPN
fuelectenerg-7534	772	35	)	)	PUNCT
fuelectenerg-7534	772	36	,	,	PUNCT
fuelectenerg-7534	772	37	2016	2016	NUM
fuelectenerg-7534	772	38	,	,	PUNCT
fuelectenerg-7534	772	39	pp	pp	ADV
fuelectenerg-7534	772	40	.	.	PUNCT
fuelectenerg-7534	773	1	235–239	235–239	NUM
fuelectenerg-7534	773	2	.	.	PUNCT
fuelectenerg-7534	774	1	[	[	X
fuelectenerg-7534	774	2	119	119	NUM
fuelectenerg-7534	774	3	]	]	X
fuelectenerg-7534	774	4	r.	r.	PROPN
fuelectenerg-7534	774	5	kumar	kumar	PROPN
fuelectenerg-7534	774	6	,	,	PUNCT
fuelectenerg-7534	774	7	u.	u.	PROPN
fuelectenerg-7534	774	8	sharma	sharma	PROPN
fuelectenerg-7534	774	9	,	,	PUNCT
fuelectenerg-7534	774	10	and	and	CCONJ
fuelectenerg-7534	774	11	p.	p.	PROPN
fuelectenerg-7534	774	12	jain	jain	PROPN
fuelectenerg-7534	774	13	,	,	PUNCT
fuelectenerg-7534	774	14	“	"	PUNCT
fuelectenerg-7534	774	15	dmtl	dmtl	NOUN
fuelectenerg-7534	774	16	filter	filter	NOUN
fuelectenerg-7534	774	17	in	in	ADP
fuelectenerg-7534	774	18	ku	ku	PROPN
fuelectenerg-7534	774	19	-	-	PUNCT
fuelectenerg-7534	774	20	band	band	NOUN
fuelectenerg-7534	774	21	with	with	ADP
fuelectenerg-7534	774	22	improved	improved	ADJ
fuelectenerg-7534	774	23	slope	slope	NOUN
fuelectenerg-7534	774	24	of	of	ADP
fuelectenerg-7534	774	25	attenuation	attenuation	NOUN
fuelectenerg-7534	774	26	after	after	ADP
fuelectenerg-7534	774	27	cutoff	cutoff	NOUN
fuelectenerg-7534	774	28	”	"	PUNCT
fuelectenerg-7534	774	29	,	,	PUNCT
fuelectenerg-7534	774	30	in	in	ADP
fuelectenerg-7534	774	31	proceedings	proceeding	NOUN
fuelectenerg-7534	774	32	of	of	ADP
fuelectenerg-7534	774	33	the	the	DET
fuelectenerg-7534	774	34	5th	5th	ADJ
fuelectenerg-7534	774	35	international	international	ADJ
fuelectenerg-7534	774	36	conference	conference	NOUN
fuelectenerg-7534	774	37	on	on	ADP
fuelectenerg-7534	774	38	signal	signal	NOUN
fuelectenerg-7534	774	39	processing	processing	NOUN
fuelectenerg-7534	774	40	and	and	CCONJ
fuelectenerg-7534	774	41	integrated	integrated	ADJ
fuelectenerg-7534	774	42	networks	network	NOUN
fuelectenerg-7534	774	43	(	(	PUNCT
fuelectenerg-7534	774	44	spin	spin	NOUN
fuelectenerg-7534	774	45	)	)	PUNCT
fuelectenerg-7534	774	46	,	,	PUNCT
fuelectenerg-7534	774	47	2018	2018	NUM
fuelectenerg-7534	774	48	,	,	PUNCT
fuelectenerg-7534	774	49	pp	pp	ADJ
fuelectenerg-7534	774	50	.	.	PUNCT
fuelectenerg-7534	775	1	569–574	569–574	NUM
fuelectenerg-7534	775	2	.	.	PUNCT
fuelectenerg-7534	776	1	[	[	X
fuelectenerg-7534	776	2	120	120	NUM
fuelectenerg-7534	776	3	]	]	PUNCT
fuelectenerg-7534	776	4	t.	t.	PROPN
fuelectenerg-7534	776	5	lin	lin	PROPN
fuelectenerg-7534	776	6	,	,	PUNCT
fuelectenerg-7534	776	7	k.	k.	PROPN
fuelectenerg-7534	776	8	k.	k.	PROPN
fuelectenerg-7534	776	9	wei	wei	PROPN
fuelectenerg-7534	776	10	low	low	PROPN
fuelectenerg-7534	776	11	,	,	PUNCT
fuelectenerg-7534	776	12	r.	r.	PROPN
fuelectenerg-7534	776	13	gaddi	gaddi	NOUN
fuelectenerg-7534	776	14	,	,	PUNCT
fuelectenerg-7534	776	15	and	and	CCONJ
fuelectenerg-7534	776	16	g.	g.	PROPN
fuelectenerg-7534	776	17	m.	m.	PROPN
fuelectenerg-7534	776	18	rebeiz	rebeiz	PROPN
fuelectenerg-7534	776	19	,	,	PUNCT
fuelectenerg-7534	776	20	“	"	PUNCT
fuelectenerg-7534	776	21	high	high	ADJ
fuelectenerg-7534	776	22	-	-	PUNCT
fuelectenerg-7534	776	23	linearity	linearity	NOUN
fuelectenerg-7534	776	24	5.3	5.3	NUM
fuelectenerg-7534	776	25	-	-	SYM
fuelectenerg-7534	776	26	7.0	7.0	NUM
fuelectenerg-7534	776	27	ghz	ghz	NOUN
fuelectenerg-7534	776	28	3	3	NUM
fuelectenerg-7534	776	29	-	-	PUNCT
fuelectenerg-7534	776	30	pole	pole	NOUN
fuelectenerg-7534	776	31	tunable	tunable	NOUN
fuelectenerg-7534	776	32	bandpass	bandpass	NOUN
fuelectenerg-7534	776	33	filter	filter	NOUN
fuelectenerg-7534	776	34	using	use	VERB
fuelectenerg-7534	776	35	commercial	commercial	ADJ
fuelectenerg-7534	776	36	rf	rf	NOUN
fuelectenerg-7534	776	37	mems	mem	NOUN
fuelectenerg-7534	776	38	capacitors	capacitor	NOUN
fuelectenerg-7534	776	39	”	"	PUNCT
fuelectenerg-7534	776	40	,	,	PUNCT
fuelectenerg-7534	776	41	in	in	ADP
fuelectenerg-7534	776	42	proceedings	proceeding	NOUN
fuelectenerg-7534	776	43	of	of	ADP
fuelectenerg-7534	776	44	the	the	DET
fuelectenerg-7534	776	45	48th	48th	ADJ
fuelectenerg-7534	776	46	european	european	ADJ
fuelectenerg-7534	776	47	microwave	microwave	PROPN
fuelectenerg-7534	776	48	conference	conference	PROPN
fuelectenerg-7534	776	49	(	(	PUNCT
fuelectenerg-7534	776	50	eumc	eumc	PROPN
fuelectenerg-7534	776	51	)	)	PUNCT
fuelectenerg-7534	776	52	,	,	PUNCT
fuelectenerg-7534	776	53	2018	2018	NUM
fuelectenerg-7534	776	54	,	,	PUNCT
fuelectenerg-7534	776	55	pp	pp	ADJ
fuelectenerg-7534	776	56	.	.	PUNCT
fuelectenerg-7534	777	1	555–558	555–558	NUM
fuelectenerg-7534	777	2	.	.	PUNCT
fuelectenerg-7534	778	1	[	[	X
fuelectenerg-7534	778	2	121	121	NUM
fuelectenerg-7534	778	3	]	]	PUNCT
fuelectenerg-7534	778	4	a.	a.	NOUN
fuelectenerg-7534	778	5	j.	j.	PROPN
fuelectenerg-7534	778	6	alazemi	alazemi	PROPN
fuelectenerg-7534	778	7	and	and	CCONJ
fuelectenerg-7534	778	8	g.	g.	PROPN
fuelectenerg-7534	778	9	m.	m.	PROPN
fuelectenerg-7534	778	10	rebeiz	rebeiz	PROPN
fuelectenerg-7534	778	11	,	,	PUNCT
fuelectenerg-7534	778	12	“	"	PUNCT
fuelectenerg-7534	778	13	a	a	DET
fuelectenerg-7534	778	14	low	low	ADJ
fuelectenerg-7534	778	15	-	-	PUNCT
fuelectenerg-7534	778	16	loss	loss	NOUN
fuelectenerg-7534	778	17	1.4	1.4	NUM
fuelectenerg-7534	778	18	-	-	SYM
fuelectenerg-7534	778	19	2.1	2.1	NUM
fuelectenerg-7534	778	20	ghz	ghz	NOUN
fuelectenerg-7534	778	21	compact	compact	ADJ
fuelectenerg-7534	778	22	tunable	tunable	NOUN
fuelectenerg-7534	778	23	three	three	NUM
fuelectenerg-7534	778	24	-	-	PUNCT
fuelectenerg-7534	778	25	pole	pole	NOUN
fuelectenerg-7534	778	26	filter	filter	NOUN
fuelectenerg-7534	778	27	with	with	ADP
fuelectenerg-7534	778	28	improved	improve	VERB
fuelectenerg-7534	778	29	stopband	stopband	NOUN
fuelectenerg-7534	778	30	rejection	rejection	NOUN
fuelectenerg-7534	778	31	using	use	VERB
fuelectenerg-7534	778	32	rf	rf	ADJ
fuelectenerg-7534	778	33	-	-	PUNCT
fuelectenerg-7534	778	34	mems	mems	ADJ
fuelectenerg-7534	778	35	capacitors	capacitor	NOUN
fuelectenerg-7534	778	36	”	"	PUNCT
fuelectenerg-7534	778	37	,	,	PUNCT
fuelectenerg-7534	778	38	in	in	ADP
fuelectenerg-7534	778	39	proceedings	proceeding	NOUN
fuelectenerg-7534	778	40	of	of	ADP
fuelectenerg-7534	778	41	the	the	DET
fuelectenerg-7534	778	42	ieee	ieee	NOUN
fuelectenerg-7534	778	43	mtt	mtt	PROPN
fuelectenerg-7534	778	44	-	-	PUNCT
fuelectenerg-7534	778	45	s	s	NOUN
fuelectenerg-7534	778	46	international	international	ADJ
fuelectenerg-7534	778	47	microwave	microwave	NOUN
fuelectenerg-7534	778	48	symposium	symposium	NOUN
fuelectenerg-7534	778	49	(	(	PUNCT
fuelectenerg-7534	778	50	ims	im	NOUN
fuelectenerg-7534	778	51	)	)	PUNCT
fuelectenerg-7534	778	52	,	,	PUNCT
fuelectenerg-7534	778	53	2016	2016	NUM
fuelectenerg-7534	778	54	,	,	PUNCT
fuelectenerg-7534	778	55	pp	pp	PROPN
fuelectenerg-7534	778	56	1–4	1–4	PROPN
fuelectenerg-7534	778	57	,	,	PUNCT
fuelectenerg-7534	778	58	2016	2016	NUM
fuelectenerg-7534	778	59	.	.	PUNCT
fuelectenerg-7534	779	1	[	[	X
fuelectenerg-7534	779	2	122	122	NUM
fuelectenerg-7534	779	3	]	]	PUNCT
fuelectenerg-7534	779	4	k.	k.	PROPN
fuelectenerg-7534	779	5	motoi	motoi	PROPN
fuelectenerg-7534	779	6	,	,	PUNCT
fuelectenerg-7534	779	7	n.	n.	PROPN
fuelectenerg-7534	779	8	oshima	oshima	PROPN
fuelectenerg-7534	779	9	,	,	PUNCT
fuelectenerg-7534	779	10	m.	m.	NOUN
fuelectenerg-7534	779	11	kitsunezuka	kitsunezuka	PROPN
fuelectenerg-7534	779	12	,	,	PUNCT
fuelectenerg-7534	779	13	and	and	CCONJ
fuelectenerg-7534	779	14	k.	k.	PROPN
fuelectenerg-7534	779	15	kunihiro	kunihiro	PROPN
fuelectenerg-7534	779	16	,	,	PUNCT
fuelectenerg-7534	779	17	“	"	PUNCT
fuelectenerg-7534	779	18	a	a	DET
fuelectenerg-7534	779	19	band	band	NOUN
fuelectenerg-7534	779	20	-	-	PUNCT
fuelectenerg-7534	779	21	switchable	switchable	ADJ
fuelectenerg-7534	779	22	and	and	CCONJ
fuelectenerg-7534	779	23	tunable	tunable	ADJ
fuelectenerg-7534	779	24	nested	nest	VERB
fuelectenerg-7534	779	25	bandpass	bandpass	NOUN
fuelectenerg-7534	779	26	filter	filter	NOUN
fuelectenerg-7534	779	27	with	with	ADP
fuelectenerg-7534	779	28	continuous	continuous	ADJ
fuelectenerg-7534	779	29	0.4	0.4	NUM
fuelectenerg-7534	779	30	-	-	PUNCT
fuelectenerg-7534	779	31	3ghz	3ghz	PROPN
fuelectenerg-7534	779	32	coverage	coverage	NOUN
fuelectenerg-7534	779	33	”	"	PUNCT
fuelectenerg-7534	779	34	,	,	PUNCT
fuelectenerg-7534	779	35	in	in	ADP
fuelectenerg-7534	779	36	proceedings	proceeding	NOUN
fuelectenerg-7534	779	37	of	of	ADP
fuelectenerg-7534	779	38	the	the	DET
fuelectenerg-7534	779	39	46th	46th	ADJ
fuelectenerg-7534	779	40	european	european	PROPN
fuelectenerg-7534	779	41	microwave	microwave	PROPN
fuelectenerg-7534	779	42	conference	conference	PROPN
fuelectenerg-7534	779	43	(	(	PUNCT
fuelectenerg-7534	779	44	eumc	eumc	PROPN
fuelectenerg-7534	779	45	)	)	PUNCT
fuelectenerg-7534	779	46	,	,	PUNCT
fuelectenerg-7534	779	47	2016	2016	NUM
fuelectenerg-7534	779	48	,	,	PUNCT
fuelectenerg-7534	779	49	pp	pp	ADJ
fuelectenerg-7534	779	50	.	.	PUNCT
fuelectenerg-7534	779	51	1421–1424	1421–1424	NUM
fuelectenerg-7534	779	52	.	.	PUNCT