id	sid	tid	token	lemma	pos
fuelectenerg-7604	1	1	facta	facta	PROPN
fuelectenerg-7604	1	2	universitatis	universitatis	PROPN
fuelectenerg-7604	1	3	series	series	NOUN
fuelectenerg-7604	1	4	:	:	PUNCT
fuelectenerg-7604	1	5	electronics	electronic	NOUN
fuelectenerg-7604	1	6	and	and	CCONJ
fuelectenerg-7604	1	7	energetics	energetics	NOUN
fuelectenerg-7604	1	8	vol	vol	NOUN
fuelectenerg-7604	1	9	.	.	PUNCT
fuelectenerg-7604	2	1	34	34	NUM
fuelectenerg-7604	2	2	,	,	PUNCT
fuelectenerg-7604	2	3	no	no	DET
fuelectenerg-7604	2	4	3	3	NUM
fuelectenerg-7604	2	5	,	,	PUNCT
fuelectenerg-7604	2	6	september	september	PROPN
fuelectenerg-7604	2	7	2021	2021	NUM
fuelectenerg-7604	2	8	,	,	PUNCT
fuelectenerg-7604	2	9	pp	pp	ADV
fuelectenerg-7604	2	10	.	.	PUNCT
fuelectenerg-7604	3	1	381	381	NUM
fuelectenerg-7604	3	2	-	-	SYM
fuelectenerg-7604	3	3	392	392	NUM
fuelectenerg-7604	3	4	https://doi.org/10.2298/fuee2103381	https://doi.org/10.2298/fuee2103381	NOUN
fuelectenerg-7604	3	5	t	t	NOUN
fuelectenerg-7604	3	6	©	©	PROPN
fuelectenerg-7604	3	7	2021	2021	NUM
fuelectenerg-7604	3	8	by	by	ADP
fuelectenerg-7604	3	9	university	university	PROPN
fuelectenerg-7604	3	10	of	of	ADP
fuelectenerg-7604	3	11	niš	niš	PROPN
fuelectenerg-7604	3	12	,	,	PUNCT
fuelectenerg-7604	3	13	serbia	serbia	PROPN
fuelectenerg-7604	3	14	|	|	ADV
fuelectenerg-7604	3	15	creative	creative	ADJ
fuelectenerg-7604	3	16	commons	common	NOUN
fuelectenerg-7604	3	17	license	license	NOUN
fuelectenerg-7604	3	18	:	:	PUNCT
fuelectenerg-7604	3	19	cc	cc	VERB
fuelectenerg-7604	3	20	by	by	ADP
fuelectenerg-7604	3	21	-	-	PUNCT
fuelectenerg-7604	3	22	nc	nc	VERB
fuelectenerg-7604	3	23	-	-	PUNCT
fuelectenerg-7604	3	24	nd	nd	ADV
fuelectenerg-7604	3	25	original	original	ADJ
fuelectenerg-7604	3	26	scientific	scientific	ADJ
fuelectenerg-7604	3	27	paper	paper	NOUN
fuelectenerg-7604	3	28	damping	damp	VERB
fuelectenerg-7604	3	29	analysis	analysis	NOUN
fuelectenerg-7604	3	30	to	to	PART
fuelectenerg-7604	3	31	improve	improve	VERB
fuelectenerg-7604	3	32	the	the	DET
fuelectenerg-7604	3	33	performance	performance	NOUN
fuelectenerg-7604	3	34	of	of	ADP
fuelectenerg-7604	3	35	shunt	shunt	NOUN
fuelectenerg-7604	3	36	capacitive	capacitive	ADJ
fuelectenerg-7604	3	37	rf	rf	VERB
fuelectenerg-7604	3	38	mems	mem	NOUN
fuelectenerg-7604	3	39	switch	switch	NOUN
fuelectenerg-7604	3	40	lakshmi	lakshmi	NOUN
fuelectenerg-7604	3	41	narayana	narayana	PROPN
fuelectenerg-7604	3	42	thalluri1	thalluri1	PROPN
fuelectenerg-7604	3	43	,	,	PUNCT
fuelectenerg-7604	3	44	k	k	PROPN
fuelectenerg-7604	3	45	v	v	X
fuelectenerg-7604	3	46	v	v	X
fuelectenerg-7604	3	47	kumar2	kumar2	NOUN
fuelectenerg-7604	3	48	,	,	PUNCT
fuelectenerg-7604	3	49	konari	konari	PROPN
fuelectenerg-7604	3	50	raja	raja	PROPN
fuelectenerg-7604	3	51	sekhar3	sekhar3	PROPN
fuelectenerg-7604	3	52	,	,	PUNCT
fuelectenerg-7604	3	53	n	n	PROPN
fuelectenerg-7604	3	54	bhushana	bhushana	PROPN
fuelectenerg-7604	3	55	babu	babu	PROPN
fuelectenerg-7604	3	56	d3	d3	PROPN
fuelectenerg-7604	3	57	,	,	PUNCT
fuelectenerg-7604	3	58	s	s	PART
fuelectenerg-7604	3	59	s	s	X
fuelectenerg-7604	3	60	kiran4	kiran4	PROPN
fuelectenerg-7604	3	61	,	,	PUNCT
fuelectenerg-7604	3	62	koushik	koushik	PROPN
fuelectenerg-7604	3	63	guha5	guha5	PROPN
fuelectenerg-7604	3	64	1department	1department	NUM
fuelectenerg-7604	3	65	of	of	ADP
fuelectenerg-7604	3	66	ece	ece	PROPN
fuelectenerg-7604	3	67	,	,	PUNCT
fuelectenerg-7604	3	68	andhra	andhra	PROPN
fuelectenerg-7604	3	69	loyola	loyola	PROPN
fuelectenerg-7604	3	70	institute	institute	PROPN
fuelectenerg-7604	3	71	of	of	ADP
fuelectenerg-7604	3	72	engineering	engineering	NOUN
fuelectenerg-7604	3	73	and	and	CCONJ
fuelectenerg-7604	3	74	technology	technology	NOUN
fuelectenerg-7604	3	75	,	,	PUNCT
fuelectenerg-7604	3	76	vijayawada	vijayawada	PROPN
fuelectenerg-7604	3	77	,	,	PUNCT
fuelectenerg-7604	3	78	andhra	andhra	PROPN
fuelectenerg-7604	3	79	pradesh	pradesh	PROPN
fuelectenerg-7604	3	80	,	,	PUNCT
fuelectenerg-7604	3	81	india	india	PROPN
fuelectenerg-7604	3	82	2department	2department	PROPN
fuelectenerg-7604	3	83	of	of	ADP
fuelectenerg-7604	3	84	ece	ece	PROPN
fuelectenerg-7604	3	85	,	,	PUNCT
fuelectenerg-7604	3	86	universal	universal	ADJ
fuelectenerg-7604	3	87	college	college	NOUN
fuelectenerg-7604	3	88	of	of	ADP
fuelectenerg-7604	3	89	engineering	engineering	NOUN
fuelectenerg-7604	3	90	and	and	CCONJ
fuelectenerg-7604	3	91	technology	technology	NOUN
fuelectenerg-7604	3	92	,	,	PUNCT
fuelectenerg-7604	3	93	perecharla	perecharla	NOUN
fuelectenerg-7604	3	94	,	,	PUNCT
fuelectenerg-7604	3	95	a	a	DET
fuelectenerg-7604	3	96	p	p	X
fuelectenerg-7604	3	97	,	,	PUNCT
fuelectenerg-7604	3	98	india	india	PROPN
fuelectenerg-7604	3	99	3department	3department	PROPN
fuelectenerg-7604	3	100	of	of	ADP
fuelectenerg-7604	3	101	ece	ece	PROPN
fuelectenerg-7604	3	102	,	,	PUNCT
fuelectenerg-7604	3	103	n	n	PROPN
fuelectenerg-7604	3	104	s	s	PROPN
fuelectenerg-7604	3	105	raju	raju	PROPN
fuelectenerg-7604	3	106	institute	institute	PROPN
fuelectenerg-7604	3	107	of	of	ADP
fuelectenerg-7604	3	108	technology	technology	PROPN
fuelectenerg-7604	3	109	(	(	PUNCT
fuelectenerg-7604	3	110	autonomous),sontyam	autonomous),sontyam	NUM
fuelectenerg-7604	3	111	,	,	PUNCT
fuelectenerg-7604	3	112	a	a	DET
fuelectenerg-7604	3	113	p	p	X
fuelectenerg-7604	3	114	,	,	PUNCT
fuelectenerg-7604	3	115	india	india	PROPN
fuelectenerg-7604	3	116	4department	4department	NUM
fuelectenerg-7604	3	117	of	of	ADP
fuelectenerg-7604	3	118	ece	ece	PROPN
fuelectenerg-7604	3	119	,	,	PUNCT
fuelectenerg-7604	3	120	lendi	lendi	PROPN
fuelectenerg-7604	3	121	institute	institute	PROPN
fuelectenerg-7604	3	122	of	of	ADP
fuelectenerg-7604	3	123	engineering	engineering	NOUN
fuelectenerg-7604	3	124	and	and	CCONJ
fuelectenerg-7604	3	125	technology	technology	NOUN
fuelectenerg-7604	3	126	,	,	PUNCT
fuelectenerg-7604	3	127	visakhapatnam	visakhapatnam	PROPN
fuelectenerg-7604	3	128	,	,	PUNCT
fuelectenerg-7604	3	129	a	a	DET
fuelectenerg-7604	3	130	p	p	X
fuelectenerg-7604	3	131	,	,	PUNCT
fuelectenerg-7604	3	132	india	india	PROPN
fuelectenerg-7604	3	133	5national	5national	NUM
fuelectenerg-7604	3	134	mems	mems	PROPN
fuelectenerg-7604	3	135	design	design	NOUN
fuelectenerg-7604	3	136	center	center	NOUN
fuelectenerg-7604	3	137	,	,	PUNCT
fuelectenerg-7604	3	138	department	department	PROPN
fuelectenerg-7604	3	139	of	of	ADP
fuelectenerg-7604	3	140	ece	ece	PROPN
fuelectenerg-7604	3	141	,	,	PUNCT
fuelectenerg-7604	3	142	national	national	PROPN
fuelectenerg-7604	3	143	institute	institute	PROPN
fuelectenerg-7604	3	144	of	of	ADP
fuelectenerg-7604	3	145	technology	technology	PROPN
fuelectenerg-7604	3	146	,	,	PUNCT
fuelectenerg-7604	3	147	silchar	silchar	PROPN
fuelectenerg-7604	3	148	,	,	PUNCT
fuelectenerg-7604	3	149	assam	assam	PROPN
fuelectenerg-7604	3	150	,	,	PUNCT
fuelectenerg-7604	3	151	india	india	PROPN
fuelectenerg-7604	3	152	abstract	abstract	NOUN
fuelectenerg-7604	3	153	.	.	PUNCT
fuelectenerg-7604	4	1	this	this	DET
fuelectenerg-7604	4	2	paper	paper	NOUN
fuelectenerg-7604	4	3	describes	describe	VERB
fuelectenerg-7604	4	4	the	the	DET
fuelectenerg-7604	4	5	significance	significance	NOUN
fuelectenerg-7604	4	6	of	of	ADP
fuelectenerg-7604	4	7	the	the	DET
fuelectenerg-7604	4	8	iterative	iterative	NOUN
fuelectenerg-7604	4	9	approach	approach	NOUN
fuelectenerg-7604	4	10	and	and	CCONJ
fuelectenerg-7604	4	11	the	the	DET
fuelectenerg-7604	4	12	structure	structure	NOUN
fuelectenerg-7604	4	13	damping	damp	VERB
fuelectenerg-7604	4	14	analysis	analysis	NOUN
fuelectenerg-7604	4	15	which	which	PRON
fuelectenerg-7604	4	16	help	help	VERB
fuelectenerg-7604	4	17	to	to	PART
fuelectenerg-7604	4	18	get	get	VERB
fuelectenerg-7604	4	19	better	well	ADJ
fuelectenerg-7604	4	20	the	the	DET
fuelectenerg-7604	4	21	performance	performance	NOUN
fuelectenerg-7604	4	22	and	and	CCONJ
fuelectenerg-7604	4	23	validation	validation	NOUN
fuelectenerg-7604	4	24	of	of	ADP
fuelectenerg-7604	4	25	shunt	shunt	NOUN
fuelectenerg-7604	4	26	capacitive	capacitive	ADJ
fuelectenerg-7604	4	27	rf	rf	NOUN
fuelectenerg-7604	4	28	mems	mem	NOUN
fuelectenerg-7604	4	29	switch	switch	NOUN
fuelectenerg-7604	4	30	.	.	PUNCT
fuelectenerg-7604	5	1	the	the	DET
fuelectenerg-7604	5	2	micro	micro	NOUN
fuelectenerg-7604	5	3	-	-	ADJ
fuelectenerg-7604	5	4	cantilever	cantilever	ADJ
fuelectenerg-7604	5	5	based	base	VERB
fuelectenerg-7604	5	6	electrostatic	electrostatic	ADJ
fuelectenerg-7604	5	7	ally	ally	NOUN
fuelectenerg-7604	5	8	actuated	actuate	VERB
fuelectenerg-7604	5	9	shunt	shunt	NOUN
fuelectenerg-7604	5	10	capacitive	capacitive	ADJ
fuelectenerg-7604	5	11	rf	rf	VERB
fuelectenerg-7604	5	12	mems	mem	NOUN
fuelectenerg-7604	5	13	switch	switch	NOUN
fuelectenerg-7604	5	14	is	be	AUX
fuelectenerg-7604	5	15	designed	design	VERB
fuelectenerg-7604	5	16	and	and	CCONJ
fuelectenerg-7604	5	17	after	after	ADP
fuelectenerg-7604	5	18	multiple	multiple	ADJ
fuelectenerg-7604	5	19	iterations	iteration	NOUN
fuelectenerg-7604	5	20	on	on	ADP
fuelectenerg-7604	5	21	cantilever	cantilever	NOUN
fuelectenerg-7604	5	22	structure	structure	NOUN
fuelectenerg-7604	5	23	a	a	DET
fuelectenerg-7604	5	24	modification	modification	NOUN
fuelectenerg-7604	5	25	of	of	ADP
fuelectenerg-7604	5	26	the	the	DET
fuelectenerg-7604	5	27	structure	structure	NOUN
fuelectenerg-7604	5	28	is	be	AUX
fuelectenerg-7604	5	29	obtained	obtain	VERB
fuelectenerg-7604	5	30	that	that	PRON
fuelectenerg-7604	5	31	requires	require	VERB
fuelectenerg-7604	5	32	low	low	ADJ
fuelectenerg-7604	5	33	actuation	actuation	NOUN
fuelectenerg-7604	5	34	voltage	voltage	NOUN
fuelectenerg-7604	5	35	of	of	ADP
fuelectenerg-7604	5	36	7.3	7.3	NUM
fuelectenerg-7604	5	37	v	v	NOUN
fuelectenerg-7604	5	38	for	for	ADP
fuelectenerg-7604	5	39	3	3	NUM
fuelectenerg-7604	5	40	µm	µm	ADP
fuelectenerg-7604	5	41	deformation	deformation	NOUN
fuelectenerg-7604	5	42	.	.	PUNCT
fuelectenerg-7604	6	1	to	to	PART
fuelectenerg-7604	6	2	validate	validate	VERB
fuelectenerg-7604	6	3	the	the	DET
fuelectenerg-7604	6	4	structure	structure	NOUN
fuelectenerg-7604	6	5	we	we	PRON
fuelectenerg-7604	6	6	have	have	AUX
fuelectenerg-7604	6	7	performed	perform	VERB
fuelectenerg-7604	6	8	the	the	DET
fuelectenerg-7604	6	9	damping	damp	VERB
fuelectenerg-7604	6	10	analysis	analysis	NOUN
fuelectenerg-7604	6	11	for	for	ADP
fuelectenerg-7604	6	12	each	each	DET
fuelectenerg-7604	6	13	iteration	iteration	NOUN
fuelectenerg-7604	6	14	.	.	PUNCT
fuelectenerg-7604	7	1	the	the	DET
fuelectenerg-7604	7	2	low	low	ADJ
fuelectenerg-7604	7	3	actuation	actuation	NOUN
fuelectenerg-7604	7	4	voltage	voltage	NOUN
fuelectenerg-7604	7	5	is	be	AUX
fuelectenerg-7604	7	6	a	a	DET
fuelectenerg-7604	7	7	consequence	consequence	NOUN
fuelectenerg-7604	7	8	of	of	ADP
fuelectenerg-7604	7	9	identifying	identify	VERB
fuelectenerg-7604	7	10	the	the	DET
fuelectenerg-7604	7	11	critical	critical	ADJ
fuelectenerg-7604	7	12	membrane	membrane	NOUN
fuelectenerg-7604	7	13	thickness	thickness	NOUN
fuelectenerg-7604	7	14	of	of	ADP
fuelectenerg-7604	7	15	0.7	0.7	NUM
fuelectenerg-7604	7	16	µm	µm	NOUN
fuelectenerg-7604	7	17	,	,	PUNCT
fuelectenerg-7604	7	18	and	and	CCONJ
fuelectenerg-7604	7	19	incorporating	incorporate	VERB
fuelectenerg-7604	7	20	two	two	NUM
fuelectenerg-7604	7	21	slots	slot	NOUN
fuelectenerg-7604	7	22	and	and	CCONJ
fuelectenerg-7604	7	23	holes	hole	NOUN
fuelectenerg-7604	7	24	into	into	ADP
fuelectenerg-7604	7	25	the	the	DET
fuelectenerg-7604	7	26	membrane	membrane	NOUN
fuelectenerg-7604	7	27	.	.	PUNCT
fuelectenerg-7604	8	1	the	the	DET
fuelectenerg-7604	8	2	holes	hole	NOUN
fuelectenerg-7604	8	3	to	to	ADP
fuelectenerg-7604	8	4	the	the	DET
fuelectenerg-7604	8	5	membrane	membrane	NOUN
fuelectenerg-7604	8	6	help	help	NOUN
fuelectenerg-7604	8	7	in	in	ADP
fuelectenerg-7604	8	8	stress	stress	ADJ
fuelectenerg-7604	8	9	distribution	distribution	NOUN
fuelectenerg-7604	8	10	.	.	PUNCT
fuelectenerg-7604	9	1	we	we	PRON
fuelectenerg-7604	9	2	performed	perform	VERB
fuelectenerg-7604	9	3	the	the	DET
fuelectenerg-7604	9	4	eigen	eigen	PROPN
fuelectenerg-7604	9	5	frequency	frequency	NOUN
fuelectenerg-7604	9	6	analysis	analysis	NOUN
fuelectenerg-7604	9	7	of	of	ADP
fuelectenerg-7604	9	8	the	the	DET
fuelectenerg-7604	9	9	membrane	membrane	NOUN
fuelectenerg-7604	9	10	.	.	PUNCT
fuelectenerg-7604	10	1	the	the	DET
fuelectenerg-7604	10	2	rf	rf	ADJ
fuelectenerg-7604	10	3	mems	mem	NOUN
fuelectenerg-7604	10	4	switch	switch	NOUN
fuelectenerg-7604	10	5	is	be	AUX
fuelectenerg-7604	10	6	micro	micro	ADV
fuelectenerg-7604	10	7	machined	machine	VERB
fuelectenerg-7604	10	8	on	on	ADP
fuelectenerg-7604	10	9	a	a	DET
fuelectenerg-7604	10	10	cpw	cpw	NOUN
fuelectenerg-7604	10	11	transmission	transmission	NOUN
fuelectenerg-7604	10	12	line	line	NOUN
fuelectenerg-7604	10	13	with	with	ADP
fuelectenerg-7604	10	14	gapstrip	gapstrip	NOUN
fuelectenerg-7604	10	15	-	-	PUNCT
fuelectenerg-7604	10	16	gap	gap	NOUN
fuelectenerg-7604	10	17	(	(	PUNCT
fuelectenerg-7604	10	18	g	g	NOUN
fuelectenerg-7604	10	19	-	-	PUNCT
fuelectenerg-7604	10	20	s	s	NOUN
fuelectenerg-7604	10	21	-	-	PUNCT
fuelectenerg-7604	10	22	g	g	NOUN
fuelectenerg-7604	10	23	)	)	PUNCT
fuelectenerg-7604	10	24	of	of	ADP
fuelectenerg-7604	10	25	85	85	NUM
fuelectenerg-7604	10	26	µm	µm	PART
fuelectenerg-7604	10	27	70	70	NUM
fuelectenerg-7604	10	28	µm	µm	ADP
fuelectenerg-7604	10	29	85	85	NUM
fuelectenerg-7604	10	30	µm	µm	NOUN
fuelectenerg-7604	10	31	.	.	PUNCT
fuelectenerg-7604	11	1	the	the	DET
fuelectenerg-7604	11	2	switch	switch	NOUN
fuelectenerg-7604	11	3	rf	rf	NOUN
fuelectenerg-7604	11	4	isolation	isolation	NOUN
fuelectenerg-7604	11	5	properties	property	NOUN
fuelectenerg-7604	11	6	are	be	AUX
fuelectenerg-7604	11	7	analyzed	analyze	VERB
fuelectenerg-7604	11	8	with	with	ADP
fuelectenerg-7604	11	9	high	high	ADJ
fuelectenerg-7604	11	10	dielectric	dielectric	ADJ
fuelectenerg-7604	11	11	constant	constant	ADJ
fuelectenerg-7604	11	12	thin	thin	ADJ
fuelectenerg-7604	11	13	films	film	NOUN
fuelectenerg-7604	11	14	i.e.	i.e.	X
fuelectenerg-7604	11	15	,	,	PUNCT
fuelectenerg-7604	11	16	aln	aln	PROPN
fuelectenerg-7604	11	17	,	,	PUNCT
fuelectenerg-7604	11	18	gaas	gaas	NOUN
fuelectenerg-7604	11	19	,	,	PUNCT
fuelectenerg-7604	11	20	and	and	CCONJ
fuelectenerg-7604	11	21	hfo2	hfo2	PROPN
fuelectenerg-7604	11	22	.	.	PUNCT
fuelectenerg-7604	12	1	for	for	ADP
fuelectenerg-7604	12	2	all	all	DET
fuelectenerg-7604	12	3	the	the	DET
fuelectenerg-7604	12	4	dielectric	dielectric	ADJ
fuelectenerg-7604	12	5	thin	thin	ADJ
fuelectenerg-7604	12	6	films	film	NOUN
fuelectenerg-7604	12	7	the	the	DET
fuelectenerg-7604	12	8	rf	rf	ADJ
fuelectenerg-7604	12	9	mems	mem	NOUN
fuelectenerg-7604	12	10	switch	switch	NOUN
fuelectenerg-7604	12	11	shows	show	VERB
fuelectenerg-7604	12	12	a	a	DET
fuelectenerg-7604	12	13	high	high	ADJ
fuelectenerg-7604	12	14	isolation	isolation	NOUN
fuelectenerg-7604	12	15	of	of	ADP
fuelectenerg-7604	12	16	-63.2	-63.2	NOUN
fuelectenerg-7604	12	17	db	db	NOUN
fuelectenerg-7604	12	18	,	,	PUNCT
fuelectenerg-7604	12	19	but	but	CCONJ
fuelectenerg-7604	12	20	there	there	PRON
fuelectenerg-7604	12	21	is	be	VERB
fuelectenerg-7604	12	22	shift	shift	NOUN
fuelectenerg-7604	12	23	in	in	ADP
fuelectenerg-7604	12	24	the	the	DET
fuelectenerg-7604	12	25	radio	radio	NOUN
fuelectenerg-7604	12	26	frequency	frequency	NOUN
fuelectenerg-7604	12	27	.	.	PUNCT
fuelectenerg-7604	13	1	because	because	SCONJ
fuelectenerg-7604	13	2	of	of	ADP
fuelectenerg-7604	13	3	presence	presence	NOUN
fuelectenerg-7604	13	4	of	of	ADP
fuelectenerg-7604	13	5	the	the	DET
fuelectenerg-7604	13	6	holes	hole	NOUN
fuelectenerg-7604	13	7	in	in	ADP
fuelectenerg-7604	13	8	the	the	DET
fuelectenerg-7604	13	9	membrane	membrane	NOUN
fuelectenerg-7604	13	10	the	the	DET
fuelectenerg-7604	13	11	switch	switch	NOUN
fuelectenerg-7604	13	12	exhibits	exhibit	VERB
fuelectenerg-7604	13	13	a	a	DET
fuelectenerg-7604	13	14	very	very	ADV
fuelectenerg-7604	13	15	low	low	ADJ
fuelectenerg-7604	13	16	insertion	insertion	NOUN
fuelectenerg-7604	13	17	loss	loss	NOUN
fuelectenerg-7604	13	18	of	of	ADP
fuelectenerg-7604	13	19	-0.12	-0.12	NUM
fuelectenerg-7604	13	20	db	db	PROPN
fuelectenerg-7604	13	21	.	.	PUNCT
fuelectenerg-7604	13	22	key	key	ADJ
fuelectenerg-7604	13	23	words	word	NOUN
fuelectenerg-7604	13	24	:	:	PUNCT
fuelectenerg-7604	13	25	vibration	vibration	NOUN
fuelectenerg-7604	13	26	analysis	analysis	NOUN
fuelectenerg-7604	13	27	,	,	PUNCT
fuelectenerg-7604	13	28	rf	rf	NOUN
fuelectenerg-7604	13	29	mems	mems	NOUN
fuelectenerg-7604	13	30	switches	switch	NOUN
fuelectenerg-7604	13	31	,	,	PUNCT
fuelectenerg-7604	13	32	material	material	NOUN
fuelectenerg-7604	13	33	science	science	NOUN
fuelectenerg-7604	13	34	,	,	PUNCT
fuelectenerg-7604	13	35	fem	fem	NOUN
fuelectenerg-7604	13	36	tools	tool	NOUN
fuelectenerg-7604	13	37	analysis	analysis	NOUN
fuelectenerg-7604	13	38	.	.	PUNCT
fuelectenerg-7604	14	1	received	receive	VERB
fuelectenerg-7604	14	2	march	march	PROPN
fuelectenerg-7604	14	3	22	22	NUM
fuelectenerg-7604	14	4	,	,	PUNCT
fuelectenerg-7604	14	5	2021	2021	NUM
fuelectenerg-7604	14	6	;	;	PUNCT
fuelectenerg-7604	14	7	received	receive	VERB
fuelectenerg-7604	14	8	in	in	ADP
fuelectenerg-7604	14	9	revised	revise	VERB
fuelectenerg-7604	14	10	form	form	NOUN
fuelectenerg-7604	14	11	june	june	PROPN
fuelectenerg-7604	14	12	06	06	NUM
fuelectenerg-7604	14	13	,	,	PUNCT
fuelectenerg-7604	14	14	2021	2021	NUM
fuelectenerg-7604	14	15	corresponding	correspond	VERB
fuelectenerg-7604	14	16	author	author	NOUN
fuelectenerg-7604	14	17	:	:	PUNCT
fuelectenerg-7604	14	18	lakshmi	lakshmi	PROPN
fuelectenerg-7604	14	19	narayana	narayana	PROPN
fuelectenerg-7604	14	20	thalluri	thalluri	PROPN
fuelectenerg-7604	14	21	department	department	PROPN
fuelectenerg-7604	14	22	of	of	ADP
fuelectenerg-7604	14	23	ece	ece	PROPN
fuelectenerg-7604	14	24	,	,	PUNCT
fuelectenerg-7604	14	25	andhra	andhra	PROPN
fuelectenerg-7604	14	26	loyola	loyola	PROPN
fuelectenerg-7604	14	27	institute	institute	PROPN
fuelectenerg-7604	14	28	of	of	ADP
fuelectenerg-7604	14	29	engineering	engineering	NOUN
fuelectenerg-7604	14	30	and	and	CCONJ
fuelectenerg-7604	14	31	technology	technology	NOUN
fuelectenerg-7604	14	32	,	,	PUNCT
fuelectenerg-7604	14	33	vijayawada	vijayawada	PROPN
fuelectenerg-7604	14	34	,	,	PUNCT
fuelectenerg-7604	14	35	andhra	andhra	PROPN
fuelectenerg-7604	14	36	pradesh	pradesh	PROPN
fuelectenerg-7604	14	37	,	,	PUNCT
fuelectenerg-7604	14	38	india	india	PROPN
fuelectenerg-7604	14	39	e	e	PROPN
fuelectenerg-7604	14	40	-	-	NOUN
fuelectenerg-7604	14	41	mail	mail	NOUN
fuelectenerg-7604	14	42	:	:	PUNCT
fuelectenerg-7604	14	43	drtln9@gmail.com	drtln9@gmail.com	X
fuelectenerg-7604	14	44	*	*	PUNCT
fuelectenerg-7604	14	45	an	an	DET
fuelectenerg-7604	14	46	earlier	early	ADJ
fuelectenerg-7604	14	47	version	version	NOUN
fuelectenerg-7604	14	48	of	of	ADP
fuelectenerg-7604	14	49	this	this	DET
fuelectenerg-7604	14	50	paper	paper	NOUN
fuelectenerg-7604	14	51	was	be	AUX
fuelectenerg-7604	14	52	presented	present	VERB
fuelectenerg-7604	14	53	at	at	ADP
fuelectenerg-7604	14	54	the	the	DET
fuelectenerg-7604	14	55	international	international	ADJ
fuelectenerg-7604	14	56	conference	conference	NOUN
fuelectenerg-7604	14	57	on	on	ADP
fuelectenerg-7604	14	58	micr	micr	PROPN
fuelectenerg-7604	14	59	/	/	SYM
fuelectenerg-7604	14	60	nano	nano	NOUN
fuelectenerg-7604	14	61	electronics	electronic	NOUN
fuelectenerg-7604	14	62	devices	device	NOUN
fuelectenerg-7604	14	63	,	,	PUNCT
fuelectenerg-7604	14	64	circuits	circuit	NOUN
fuelectenerg-7604	14	65	and	and	CCONJ
fuelectenerg-7604	14	66	systems	system	NOUN
fuelectenerg-7604	14	67	(	(	PUNCT
fuelectenerg-7604	14	68	mndcs-2021	mndcs-2021	NOUN
fuelectenerg-7604	14	69	)	)	PUNCT
fuelectenerg-7604	14	70	,	,	PUNCT
fuelectenerg-7604	14	71	30	30	NUM
fuelectenerg-7604	14	72	-	-	SYM
fuelectenerg-7604	14	73	31	31	NUM
fuelectenerg-7604	14	74	january	january	PROPN
fuelectenerg-7604	14	75	,	,	PUNCT
fuelectenerg-7604	14	76	2021	2021	NUM
fuelectenerg-7604	14	77	,	,	PUNCT
fuelectenerg-7604	14	78	india	india	PROPN
fuelectenerg-7604	15	1	[	[	X
fuelectenerg-7604	15	2	1	1	NUM
fuelectenerg-7604	15	3	]	]	PUNCT
fuelectenerg-7604	15	4	.	.	PUNCT
fuelectenerg-7604	16	1	382	382	NUM
fuelectenerg-7604	16	2	l.	l.	PROPN
fuelectenerg-7604	16	3	n.	n.	PROPN
fuelectenerg-7604	16	4	thalluri	thalluri	PROPN
fuelectenerg-7604	16	5	,	,	PUNCT
fuelectenerg-7604	16	6	k	k	PROPN
fuelectenerg-7604	16	7	v	v	PROPN
fuelectenerg-7604	16	8	v	v	X
fuelectenerg-7604	16	9	kumar	kumar	PROPN
fuelectenerg-7604	16	10	,	,	PUNCT
fuelectenerg-7604	16	11	k.	k.	PROPN
fuelectenerg-7604	16	12	r.	r.	PROPN
fuelectenerg-7604	16	13	sekhar	sekhar	PROPN
fuelectenerg-7604	16	14	,	,	PUNCT
fuelectenerg-7604	16	15	n	n	PROPN
fuelectenerg-7604	16	16	b	b	PROPN
fuelectenerg-7604	16	17	babu	babu	PROPN
fuelectenerg-7604	16	18	d.3	d.3	PROPN
fuelectenerg-7604	16	19	,	,	PUNCT
fuelectenerg-7604	16	20	s	s	PART
fuelectenerg-7604	16	21	s	s	X
fuelectenerg-7604	16	22	kiran	kiran	NOUN
fuelectenerg-7604	16	23	,	,	PUNCT
fuelectenerg-7604	16	24	k.	k.	PROPN
fuelectenerg-7604	16	25	guha	guha	PROPN
fuelectenerg-7604	16	26	1	1	NUM
fuelectenerg-7604	16	27	.	.	PUNCT
fuelectenerg-7604	16	28	introduction	introduction	NOUN
fuelectenerg-7604	16	29	rf	rf	NOUN
fuelectenerg-7604	16	30	mems	mems	PROPN
fuelectenerg-7604	16	31	switches	switch	NOUN
fuelectenerg-7604	16	32	are	be	AUX
fuelectenerg-7604	16	33	becoming	become	VERB
fuelectenerg-7604	16	34	prominent	prominent	ADJ
fuelectenerg-7604	16	35	because	because	SCONJ
fuelectenerg-7604	16	36	of	of	ADP
fuelectenerg-7604	16	37	their	their	PRON
fuelectenerg-7604	16	38	low	low	ADJ
fuelectenerg-7604	16	39	power	power	NOUN
fuelectenerg-7604	16	40	consumption	consumption	NOUN
fuelectenerg-7604	16	41	and	and	CCONJ
fuelectenerg-7604	16	42	high	high	ADJ
fuelectenerg-7604	16	43	linearity	linearity	NOUN
fuelectenerg-7604	17	1	[	[	X
fuelectenerg-7604	17	2	1	1	NUM
fuelectenerg-7604	17	3	]	]	PUNCT
fuelectenerg-7604	17	4	.	.	PUNCT
fuelectenerg-7604	18	1	shunt	shunt	VERB
fuelectenerg-7604	18	2	capacitive	capacitive	ADJ
fuelectenerg-7604	18	3	rf	rf	NOUN
fuelectenerg-7604	18	4	mems	mem	NOUN
fuelectenerg-7604	18	5	switches	switch	NOUN
fuelectenerg-7604	18	6	are	be	AUX
fuelectenerg-7604	18	7	extremely	extremely	ADV
fuelectenerg-7604	18	8	useful	useful	ADJ
fuelectenerg-7604	18	9	in	in	ADP
fuelectenerg-7604	18	10	rf	rf	NOUN
fuelectenerg-7604	18	11	mems	mem	NOUN
fuelectenerg-7604	18	12	technology	technology	NOUN
fuelectenerg-7604	18	13	which	which	PRON
fuelectenerg-7604	18	14	has	have	VERB
fuelectenerg-7604	18	15	great	great	ADJ
fuelectenerg-7604	18	16	potential	potential	NOUN
fuelectenerg-7604	18	17	in	in	ADP
fuelectenerg-7604	18	18	the	the	DET
fuelectenerg-7604	18	19	design	design	NOUN
fuelectenerg-7604	18	20	of	of	ADP
fuelectenerg-7604	18	21	reconfigurable	reconfigurable	ADJ
fuelectenerg-7604	18	22	antennas	antenna	NOUN
fuelectenerg-7604	18	23	[	[	X
fuelectenerg-7604	18	24	2	2	NUM
fuelectenerg-7604	18	25	]	]	PUNCT
fuelectenerg-7604	18	26	.	.	PUNCT
fuelectenerg-7604	19	1	the	the	DET
fuelectenerg-7604	19	2	frequency	frequency	NOUN
fuelectenerg-7604	19	3	range	range	NOUN
fuelectenerg-7604	19	4	of	of	ADP
fuelectenerg-7604	19	5	1.5	1.5	NUM
fuelectenerg-7604	19	6	15	15	NUM
fuelectenerg-7604	19	7	ghz	ghz	NOUN
fuelectenerg-7604	19	8	is	be	AUX
fuelectenerg-7604	19	9	the	the	DET
fuelectenerg-7604	19	10	major	major	ADJ
fuelectenerg-7604	19	11	band	band	NOUN
fuelectenerg-7604	19	12	which	which	PRON
fuelectenerg-7604	19	13	will	will	AUX
fuelectenerg-7604	19	14	cover	cover	VERB
fuelectenerg-7604	19	15	significant	significant	ADJ
fuelectenerg-7604	19	16	wireless	wireless	ADJ
fuelectenerg-7604	19	17	applications	application	NOUN
fuelectenerg-7604	19	18	like	like	ADP
fuelectenerg-7604	19	19	gps	gps	PROPN
fuelectenerg-7604	19	20	,	,	PUNCT
fuelectenerg-7604	19	21	gsm	gsm	NOUN
fuelectenerg-7604	19	22	,	,	PUNCT
fuelectenerg-7604	19	23	wi	wi	PROPN
fuelectenerg-7604	19	24	-	-	PUNCT
fuelectenerg-7604	19	25	fi	fi	NOUN
fuelectenerg-7604	19	26	,	,	PUNCT
fuelectenerg-7604	19	27	wi	wi	PROPN
fuelectenerg-7604	19	28	-	-	PUNCT
fuelectenerg-7604	19	29	max	max	PROPN
fuelectenerg-7604	19	30	,	,	PUNCT
fuelectenerg-7604	19	31	and	and	CCONJ
fuelectenerg-7604	19	32	umts	umts	X
fuelectenerg-7604	19	33	[	[	X
fuelectenerg-7604	19	34	3	3	NUM
fuelectenerg-7604	19	35	]	]	PUNCT
fuelectenerg-7604	19	36	.	.	PUNCT
fuelectenerg-7604	20	1	potential	potential	ADJ
fuelectenerg-7604	20	2	major	major	ADJ
fuelectenerg-7604	20	3	research	research	NOUN
fuelectenerg-7604	20	4	challenges	challenge	NOUN
fuelectenerg-7604	20	5	of	of	ADP
fuelectenerg-7604	20	6	electrostatically	electrostatically	ADV
fuelectenerg-7604	20	7	actuated	actuate	VERB
fuelectenerg-7604	20	8	rf	rf	NOUN
fuelectenerg-7604	20	9	mems	mem	NOUN
fuelectenerg-7604	20	10	switches	switch	NOUN
fuelectenerg-7604	20	11	are	be	AUX
fuelectenerg-7604	20	12	how	how	SCONJ
fuelectenerg-7604	20	13	to	to	PART
fuelectenerg-7604	20	14	reduce	reduce	VERB
fuelectenerg-7604	20	15	the	the	DET
fuelectenerg-7604	20	16	required	require	VERB
fuelectenerg-7604	20	17	actuation	actuation	NOUN
fuelectenerg-7604	20	18	voltage	voltage	NOUN
fuelectenerg-7604	20	19	,	,	PUNCT
fuelectenerg-7604	20	20	improve	improve	VERB
fuelectenerg-7604	20	21	their	their	PRON
fuelectenerg-7604	20	22	switching	switching	NOUN
fuelectenerg-7604	20	23	time	time	NOUN
fuelectenerg-7604	20	24	and	and	CCONJ
fuelectenerg-7604	20	25	reliability	reliability	NOUN
fuelectenerg-7604	20	26	.	.	PUNCT
fuelectenerg-7604	21	1	a	a	DET
fuelectenerg-7604	21	2	proper	proper	ADJ
fuelectenerg-7604	21	3	iterative	iterative	NOUN
fuelectenerg-7604	21	4	study	study	NOUN
fuelectenerg-7604	21	5	helps	help	VERB
fuelectenerg-7604	21	6	to	to	PART
fuelectenerg-7604	21	7	obtain	obtain	VERB
fuelectenerg-7604	21	8	better	well	ADJ
fuelectenerg-7604	21	9	mechanical	mechanical	ADJ
fuelectenerg-7604	21	10	,	,	PUNCT
fuelectenerg-7604	21	11	electrical	electrical	ADJ
fuelectenerg-7604	21	12	and	and	CCONJ
fuelectenerg-7604	21	13	rf	rf	ADJ
fuelectenerg-7604	21	14	properties	property	NOUN
fuelectenerg-7604	21	15	of	of	ADP
fuelectenerg-7604	21	16	the	the	DET
fuelectenerg-7604	21	17	switch	switch	NOUN
fuelectenerg-7604	21	18	.	.	PUNCT
fuelectenerg-7604	22	1	the	the	DET
fuelectenerg-7604	22	2	cantilever	cantilever	NOUN
fuelectenerg-7604	22	3	-	-	PUNCT
fuelectenerg-7604	22	4	based	base	VERB
fuelectenerg-7604	22	5	,	,	PUNCT
fuelectenerg-7604	22	6	serpentine	serpentine	NOUN
fuelectenerg-7604	22	7	,	,	PUNCT
fuelectenerg-7604	22	8	fixed	fix	VERB
fuelectenerg-7604	22	9	-	-	PUNCT
fuelectenerg-7604	22	10	fixed	fix	VERB
fuelectenerg-7604	22	11	,	,	PUNCT
fuelectenerg-7604	22	12	folded	fold	VERB
fuelectenerg-7604	22	13	membrane	membrane	NOUN
fuelectenerg-7604	22	14	structures	structure	NOUN
fuelectenerg-7604	22	15	are	be	AUX
fuelectenerg-7604	22	16	popular	popular	ADJ
fuelectenerg-7604	22	17	in	in	ADP
fuelectenerg-7604	22	18	the	the	DET
fuelectenerg-7604	22	19	design	design	NOUN
fuelectenerg-7604	22	20	of	of	ADP
fuelectenerg-7604	22	21	mems	mem	NOUN
fuelectenerg-7604	22	22	devices	device	NOUN
fuelectenerg-7604	22	23	.	.	PUNCT
fuelectenerg-7604	23	1	among	among	ADP
fuelectenerg-7604	23	2	these	these	PRON
fuelectenerg-7604	23	3	,	,	PUNCT
fuelectenerg-7604	23	4	the	the	DET
fuelectenerg-7604	23	5	cantilever	cantilever	NOUN
fuelectenerg-7604	23	6	based	base	VERB
fuelectenerg-7604	23	7	devices	device	NOUN
fuelectenerg-7604	23	8	offer	offer	VERB
fuelectenerg-7604	23	9	low	low	ADJ
fuelectenerg-7604	23	10	actuation	actuation	NOUN
fuelectenerg-7604	23	11	voltage	voltage	NOUN
fuelectenerg-7604	23	12	and	and	CCONJ
fuelectenerg-7604	23	13	better	well	ADJ
fuelectenerg-7604	23	14	switching	switch	VERB
fuelectenerg-7604	23	15	properties	property	NOUN
fuelectenerg-7604	23	16	[	[	X
fuelectenerg-7604	23	17	4	4	NUM
fuelectenerg-7604	23	18	-	-	SYM
fuelectenerg-7604	23	19	6	6	NUM
fuelectenerg-7604	23	20	]	]	PUNCT
fuelectenerg-7604	23	21	.	.	PUNCT
fuelectenerg-7604	24	1	but	but	CCONJ
fuelectenerg-7604	24	2	,	,	PUNCT
fuelectenerg-7604	24	3	there	there	PRON
fuelectenerg-7604	24	4	is	be	VERB
fuelectenerg-7604	24	5	still	still	ADV
fuelectenerg-7604	24	6	room	room	NOUN
fuelectenerg-7604	24	7	to	to	PART
fuelectenerg-7604	24	8	improve	improve	VERB
fuelectenerg-7604	24	9	the	the	DET
fuelectenerg-7604	24	10	cantilever	cantilever	NOUN
fuelectenerg-7604	24	11	performance	performance	NOUN
fuelectenerg-7604	24	12	by	by	ADP
fuelectenerg-7604	24	13	the	the	DET
fuelectenerg-7604	24	14	iterative	iterative	NOUN
fuelectenerg-7604	24	15	analysis	analysis	NOUN
fuelectenerg-7604	24	16	.	.	PUNCT
fuelectenerg-7604	25	1	material	material	NOUN
fuelectenerg-7604	25	2	science	science	NOUN
fuelectenerg-7604	25	3	also	also	ADV
fuelectenerg-7604	25	4	helps	help	VERB
fuelectenerg-7604	25	5	to	to	PART
fuelectenerg-7604	25	6	choose	choose	VERB
fuelectenerg-7604	25	7	the	the	DET
fuelectenerg-7604	25	8	most	most	ADV
fuelectenerg-7604	25	9	suitable	suitable	ADJ
fuelectenerg-7604	25	10	thin	thin	ADJ
fuelectenerg-7604	25	11	film	film	NOUN
fuelectenerg-7604	25	12	for	for	ADP
fuelectenerg-7604	25	13	the	the	DET
fuelectenerg-7604	25	14	substrate	substrate	NOUN
fuelectenerg-7604	25	15	,	,	PUNCT
fuelectenerg-7604	25	16	the	the	DET
fuelectenerg-7604	25	17	transmission	transmission	NOUN
fuelectenerg-7604	25	18	line	line	NOUN
fuelectenerg-7604	25	19	and	and	CCONJ
fuelectenerg-7604	25	20	the	the	DET
fuelectenerg-7604	25	21	membrane	membrane	NOUN
fuelectenerg-7604	25	22	[	[	X
fuelectenerg-7604	25	23	7	7	NUM
fuelectenerg-7604	25	24	]	]	SYM
fuelectenerg-7604	25	25	.	.	PUNCT
fuelectenerg-7604	26	1	2	2	X
fuelectenerg-7604	26	2	.	.	X
fuelectenerg-7604	26	3	related	relate	VERB
fuelectenerg-7604	26	4	work	work	NOUN
fuelectenerg-7604	26	5	in	in	ADP
fuelectenerg-7604	26	6	the	the	DET
fuelectenerg-7604	26	7	early	early	ADJ
fuelectenerg-7604	26	8	decades	decade	NOUN
fuelectenerg-7604	26	9	,	,	PUNCT
fuelectenerg-7604	26	10	several	several	ADJ
fuelectenerg-7604	26	11	researchers	researcher	NOUN
fuelectenerg-7604	26	12	advanced	advance	VERB
fuelectenerg-7604	26	13	the	the	DET
fuelectenerg-7604	26	14	research	research	NOUN
fuelectenerg-7604	26	15	on	on	ADP
fuelectenerg-7604	26	16	rf	rf	NOUN
fuelectenerg-7604	26	17	mems	mem	NOUN
fuelectenerg-7604	26	18	switches	switch	NOUN
fuelectenerg-7604	26	19	.	.	PUNCT
fuelectenerg-7604	27	1	electrostatic	electrostatic	ADJ
fuelectenerg-7604	27	2	,	,	PUNCT
fuelectenerg-7604	27	3	magneto	magneto	NOUN
fuelectenerg-7604	27	4	static	static	PROPN
fuelectenerg-7604	27	5	,	,	PUNCT
fuelectenerg-7604	27	6	piezo	piezo	X
fuelectenerg-7604	27	7	resistive	resistive	NOUN
fuelectenerg-7604	27	8	,	,	PUNCT
fuelectenerg-7604	27	9	and	and	CCONJ
fuelectenerg-7604	27	10	thermal	thermal	NOUN
fuelectenerg-7604	27	11	are	be	AUX
fuelectenerg-7604	27	12	the	the	DET
fuelectenerg-7604	27	13	popular	popular	ADJ
fuelectenerg-7604	27	14	actuation	actuation	NOUN
fuelectenerg-7604	27	15	techniques	technique	NOUN
fuelectenerg-7604	27	16	.	.	PUNCT
fuelectenerg-7604	28	1	among	among	ADP
fuelectenerg-7604	28	2	these	these	PRON
fuelectenerg-7604	28	3	,	,	PUNCT
fuelectenerg-7604	28	4	electrostatic	electrostatic	ADJ
fuelectenerg-7604	28	5	actuation	actuation	NOUN
fuelectenerg-7604	28	6	offers	offer	VERB
fuelectenerg-7604	28	7	major	major	ADJ
fuelectenerg-7604	28	8	advantages	advantage	NOUN
fuelectenerg-7604	28	9	[	[	X
fuelectenerg-7604	28	10	8	8	NUM
fuelectenerg-7604	28	11	]	]	PUNCT
fuelectenerg-7604	28	12	.	.	PUNCT
fuelectenerg-7604	29	1	however	however	ADV
fuelectenerg-7604	29	2	,	,	PUNCT
fuelectenerg-7604	29	3	there	there	PRON
fuelectenerg-7604	29	4	are	be	VERB
fuelectenerg-7604	29	5	still	still	ADV
fuelectenerg-7604	29	6	a	a	DET
fuelectenerg-7604	29	7	few	few	ADJ
fuelectenerg-7604	29	8	potential	potential	ADJ
fuelectenerg-7604	29	9	research	research	NOUN
fuelectenerg-7604	29	10	challenges	challenge	NOUN
fuelectenerg-7604	29	11	in	in	ADP
fuelectenerg-7604	29	12	electrostatically	electrostatically	ADV
fuelectenerg-7604	29	13	actuated	actuate	VERB
fuelectenerg-7604	29	14	rf	rf	NOUN
fuelectenerg-7604	29	15	mems	mem	NOUN
fuelectenerg-7604	29	16	switches	switch	NOUN
fuelectenerg-7604	29	17	,	,	PUNCT
fuelectenerg-7604	29	18	like	like	ADP
fuelectenerg-7604	29	19	improving	improve	VERB
fuelectenerg-7604	29	20	the	the	DET
fuelectenerg-7604	29	21	reliability	reliability	NOUN
fuelectenerg-7604	29	22	,	,	PUNCT
fuelectenerg-7604	29	23	reducing	reduce	VERB
fuelectenerg-7604	29	24	the	the	DET
fuelectenerg-7604	29	25	actuation	actuation	NOUN
fuelectenerg-7604	29	26	voltage	voltage	NOUN
fuelectenerg-7604	29	27	,	,	PUNCT
fuelectenerg-7604	29	28	and	and	CCONJ
fuelectenerg-7604	29	29	improving	improve	VERB
fuelectenerg-7604	29	30	the	the	DET
fuelectenerg-7604	29	31	switching	switch	VERB
fuelectenerg-7604	29	32	time	time	NOUN
fuelectenerg-7604	29	33	[	[	X
fuelectenerg-7604	29	34	9	9	NUM
fuelectenerg-7604	29	35	,	,	PUNCT
fuelectenerg-7604	29	36	10	10	NUM
fuelectenerg-7604	29	37	]	]	PUNCT
fuelectenerg-7604	29	38	.	.	PUNCT
fuelectenerg-7604	30	1	the	the	DET
fuelectenerg-7604	30	2	prior	prior	ADJ
fuelectenerg-7604	30	3	iterative	iterative	NOUN
fuelectenerg-7604	30	4	analysis	analysis	NOUN
fuelectenerg-7604	30	5	obviously	obviously	ADV
fuelectenerg-7604	30	6	helps	help	VERB
fuelectenerg-7604	30	7	to	to	PART
fuelectenerg-7604	30	8	improve	improve	VERB
fuelectenerg-7604	30	9	the	the	DET
fuelectenerg-7604	30	10	performance	performance	NOUN
fuelectenerg-7604	30	11	of	of	ADP
fuelectenerg-7604	30	12	the	the	DET
fuelectenerg-7604	30	13	rf	rf	ADJ
fuelectenerg-7604	30	14	mems	mems	PROPN
fuelectenerg-7604	30	15	switches	switch	NOUN
fuelectenerg-7604	30	16	.	.	PUNCT
fuelectenerg-7604	31	1	material	material	NOUN
fuelectenerg-7604	31	2	science	science	NOUN
fuelectenerg-7604	31	3	has	have	VERB
fuelectenerg-7604	31	4	a	a	DET
fuelectenerg-7604	31	5	prominent	prominent	ADJ
fuelectenerg-7604	31	6	role	role	NOUN
fuelectenerg-7604	31	7	in	in	ADP
fuelectenerg-7604	31	8	the	the	DET
fuelectenerg-7604	31	9	selection	selection	NOUN
fuelectenerg-7604	31	10	of	of	ADP
fuelectenerg-7604	31	11	thin	thin	ADJ
fuelectenerg-7604	31	12	films	film	NOUN
fuelectenerg-7604	31	13	for	for	ADP
fuelectenerg-7604	31	14	the	the	DET
fuelectenerg-7604	31	15	transmission	transmission	NOUN
fuelectenerg-7604	31	16	lines	line	NOUN
fuelectenerg-7604	31	17	and	and	CCONJ
fuelectenerg-7604	31	18	the	the	DET
fuelectenerg-7604	31	19	membranes	membrane	NOUN
fuelectenerg-7604	31	20	.	.	PUNCT
fuelectenerg-7604	32	1	silicon	silicon	NOUN
fuelectenerg-7604	32	2	or	or	CCONJ
fuelectenerg-7604	32	3	glass	glass	NOUN
fuelectenerg-7604	32	4	materials	material	NOUN
fuelectenerg-7604	32	5	are	be	AUX
fuelectenerg-7604	32	6	generally	generally	ADV
fuelectenerg-7604	32	7	used	use	VERB
fuelectenerg-7604	32	8	for	for	ADP
fuelectenerg-7604	32	9	the	the	DET
fuelectenerg-7604	32	10	substrate	substrate	NOUN
fuelectenerg-7604	32	11	[	[	X
fuelectenerg-7604	32	12	11	11	NUM
fuelectenerg-7604	32	13	]	]	PUNCT
fuelectenerg-7604	32	14	.	.	PUNCT
fuelectenerg-7604	33	1	the	the	DET
fuelectenerg-7604	33	2	cpw	cpw	NOUN
fuelectenerg-7604	33	3	and	and	CCONJ
fuelectenerg-7604	33	4	the	the	DET
fuelectenerg-7604	33	5	membranes	membrane	NOUN
fuelectenerg-7604	33	6	are	be	AUX
fuelectenerg-7604	33	7	micro	micro	ADV
fuelectenerg-7604	33	8	machined	machine	VERB
fuelectenerg-7604	33	9	in	in	ADP
fuelectenerg-7604	33	10	au	au	PROPN
fuelectenerg-7604	33	11	,	,	PUNCT
fuelectenerg-7604	33	12	al	al	PROPN
fuelectenerg-7604	33	13	,	,	PUNCT
fuelectenerg-7604	33	14	cu	cu	PROPN
fuelectenerg-7604	33	15	,	,	PUNCT
fuelectenerg-7604	33	16	and	and	CCONJ
fuelectenerg-7604	33	17	ti	ti	X
fuelectenerg-7604	33	18	.	.	PROPN
fuelectenerg-7604	33	19	for	for	ADP
fuelectenerg-7604	33	20	capacitive	capacitive	ADJ
fuelectenerg-7604	33	21	mems	mem	NOUN
fuelectenerg-7604	33	22	switches	switch	VERB
fuelectenerg-7604	33	23	the	the	DET
fuelectenerg-7604	33	24	dielectric	dielectric	ADJ
fuelectenerg-7604	33	25	material	material	NOUN
fuelectenerg-7604	33	26	used	use	VERB
fuelectenerg-7604	33	27	plays	play	VERB
fuelectenerg-7604	33	28	an	an	DET
fuelectenerg-7604	33	29	important	important	ADJ
fuelectenerg-7604	33	30	role	role	NOUN
fuelectenerg-7604	33	31	in	in	ADP
fuelectenerg-7604	33	32	improving	improve	VERB
fuelectenerg-7604	33	33	the	the	DET
fuelectenerg-7604	33	34	rf	rf	ADJ
fuelectenerg-7604	33	35	properties	property	NOUN
fuelectenerg-7604	33	36	[	[	X
fuelectenerg-7604	33	37	12	12	NUM
fuelectenerg-7604	33	38	]	]	PUNCT
fuelectenerg-7604	33	39	.	.	PUNCT
fuelectenerg-7604	34	1	the	the	DET
fuelectenerg-7604	34	2	rf	rf	NOUN
fuelectenerg-7604	34	3	properties	property	NOUN
fuelectenerg-7604	34	4	i.e.	i.e.	ADV
fuelectenerg-7604	34	5	,	,	PUNCT
fuelectenerg-7604	34	6	insertion	insertion	NOUN
fuelectenerg-7604	34	7	and	and	CCONJ
fuelectenerg-7604	34	8	isolation	isolation	NOUN
fuelectenerg-7604	34	9	losses	loss	NOUN
fuelectenerg-7604	34	10	of	of	ADP
fuelectenerg-7604	34	11	the	the	DET
fuelectenerg-7604	34	12	switch	switch	NOUN
fuelectenerg-7604	34	13	truly	truly	ADV
fuelectenerg-7604	34	14	rely	rely	VERB
fuelectenerg-7604	34	15	on	on	ADP
fuelectenerg-7604	34	16	the	the	DET
fuelectenerg-7604	34	17	capacitance	capacitance	NOUN
fuelectenerg-7604	34	18	ratio	ratio	NOUN
fuelectenerg-7604	34	19	.	.	PUNCT
fuelectenerg-7604	35	1	the	the	DET
fuelectenerg-7604	35	2	ratio	ratio	NOUN
fuelectenerg-7604	35	3	of	of	ADP
fuelectenerg-7604	35	4	downstate	downstate	ADJ
fuelectenerg-7604	35	5	capacitance	capacitance	NOUN
fuelectenerg-7604	35	6	to	to	ADP
fuelectenerg-7604	35	7	upstate	upstate	ADJ
fuelectenerg-7604	35	8	capacitance	capacitance	NOUN
fuelectenerg-7604	35	9	is	be	AUX
fuelectenerg-7604	35	10	known	know	VERB
fuelectenerg-7604	35	11	as	as	ADP
fuelectenerg-7604	35	12	the	the	DET
fuelectenerg-7604	35	13	capacitance	capacitance	NOUN
fuelectenerg-7604	35	14	ratio	ratio	NOUN
fuelectenerg-7604	35	15	[	[	X
fuelectenerg-7604	35	16	13	13	NUM
fuelectenerg-7604	35	17	]	]	PUNCT
fuelectenerg-7604	35	18	.	.	PUNCT
fuelectenerg-7604	36	1	3	3	X
fuelectenerg-7604	36	2	.	.	X
fuelectenerg-7604	36	3	mathematical	mathematical	ADJ
fuelectenerg-7604	36	4	analysis	analysis	NOUN
fuelectenerg-7604	36	5	the	the	DET
fuelectenerg-7604	36	6	rectangular	rectangular	ADJ
fuelectenerg-7604	36	7	cantilever	cantilever	NOUN
fuelectenerg-7604	36	8	critical	critical	ADJ
fuelectenerg-7604	36	9	stress	stress	NOUN
fuelectenerg-7604	36	10	analysis	analysis	NOUN
fuelectenerg-7604	36	11	is	be	AUX
fuelectenerg-7604	36	12	indispensable	indispensable	ADJ
fuelectenerg-7604	36	13	because	because	SCONJ
fuelectenerg-7604	36	14	it	it	PRON
fuelectenerg-7604	36	15	primarily	primarily	ADV
fuelectenerg-7604	36	16	determines	determine	VERB
fuelectenerg-7604	36	17	the	the	DET
fuelectenerg-7604	36	18	switch	switch	NOUN
fuelectenerg-7604	36	19	reliability	reliability	NOUN
fuelectenerg-7604	36	20	.	.	PUNCT
fuelectenerg-7604	37	1	the	the	DET
fuelectenerg-7604	37	2	critical	critical	ADJ
fuelectenerg-7604	37	3	stress	stress	NOUN
fuelectenerg-7604	37	4	(	(	PUNCT
fuelectenerg-7604	37	5	σc	σc	NOUN
fuelectenerg-7604	37	6	)	)	PUNCT
fuelectenerg-7604	37	7	in	in	ADP
fuelectenerg-7604	37	8	terms	term	NOUN
fuelectenerg-7604	37	9	of	of	ADP
fuelectenerg-7604	37	10	cantilever	cantilever	NOUN
fuelectenerg-7604	37	11	dimensions	dimension	NOUN
fuelectenerg-7604	37	12	and	and	CCONJ
fuelectenerg-7604	37	13	the	the	DET
fuelectenerg-7604	37	14	young	young	ADJ
fuelectenerg-7604	37	15	's	's	PART
fuelectenerg-7604	37	16	modulus	modulus	NOUN
fuelectenerg-7604	37	17	(	(	PUNCT
fuelectenerg-7604	37	18	e	e	NOUN
fuelectenerg-7604	37	19	)	)	PUNCT
fuelectenerg-7604	37	20	can	can	AUX
fuelectenerg-7604	37	21	be	be	AUX
fuelectenerg-7604	37	22	expresses	express	NOUN
fuelectenerg-7604	37	23	as	as	ADP
fuelectenerg-7604	37	24	[	[	X
fuelectenerg-7604	37	25	14	14	NUM
fuelectenerg-7604	37	26	]	]	X
fuelectenerg-7604	37	27	,	,	PUNCT
fuelectenerg-7604	37	28	2	2	NUM
fuelectenerg-7604	37	29	2	2	NUM
fuelectenerg-7604	37	30	248	248	NUM
fuelectenerg-7604	37	31	(	(	PUNCT
fuelectenerg-7604	37	32	1	1	NUM
fuelectenerg-7604	37	33	)	)	PUNCT
fuelectenerg-7604	37	34	c	c	NOUN
fuelectenerg-7604	37	35	et	et	NOUN
fuelectenerg-7604	37	36	l	l	NOUN
fuelectenerg-7604	37	37			PROPN
fuelectenerg-7604	37	38			PROPN
fuelectenerg-7604	37	39			NOUN
fuelectenerg-7604	37	40	=	=	SYM
fuelectenerg-7604	37	41	−	−	PROPN
fuelectenerg-7604	37	42	(	(	PUNCT
fuelectenerg-7604	37	43	1	1	NUM
fuelectenerg-7604	37	44	)	)	PUNCT
fuelectenerg-7604	37	45	fig	fig	NOUN
fuelectenerg-7604	37	46	.	.	PUNCT
fuelectenerg-7604	38	1	1	1	NUM
fuelectenerg-7604	38	2	cantilever	cantilever	NOUN
fuelectenerg-7604	38	3	membrane	membrane	NOUN
fuelectenerg-7604	38	4	damping	damp	VERB
fuelectenerg-7604	38	5	analysis	analysis	NOUN
fuelectenerg-7604	38	6	to	to	PART
fuelectenerg-7604	38	7	improve	improve	VERB
fuelectenerg-7604	38	8	the	the	DET
fuelectenerg-7604	38	9	performance	performance	NOUN
fuelectenerg-7604	38	10	of	of	ADP
fuelectenerg-7604	38	11	shunt	shunt	NOUN
fuelectenerg-7604	38	12	capacitive	capacitive	ADJ
fuelectenerg-7604	38	13	rf	rf	NOUN
fuelectenerg-7604	38	14	mems	mem	NOUN
fuelectenerg-7604	38	15	switch	switch	VERB
fuelectenerg-7604	38	16	383	383	NUM
fuelectenerg-7604	38	17	for	for	ADP
fuelectenerg-7604	38	18	the	the	DET
fuelectenerg-7604	38	19	cantilever	cantilever	NOUN
fuelectenerg-7604	38	20	membrane	membrane	NOUN
fuelectenerg-7604	38	21	as	as	SCONJ
fuelectenerg-7604	38	22	shown	show	VERB
fuelectenerg-7604	38	23	in	in	ADP
fuelectenerg-7604	38	24	fig	fig	NOUN
fuelectenerg-7604	38	25	.	.	PUNCT
fuelectenerg-7604	39	1	1	1	NUM
fuelectenerg-7604	39	2	,	,	PUNCT
fuelectenerg-7604	39	3	the	the	DET
fuelectenerg-7604	39	4	stiffness	stiffness	NOUN
fuelectenerg-7604	39	5	is	be	AUX
fuelectenerg-7604	39	6	equal	equal	ADJ
fuelectenerg-7604	39	7	to	to	ADP
fuelectenerg-7604	39	8	that	that	PRON
fuelectenerg-7604	39	9	of	of	ADP
fuelectenerg-7604	39	10	the	the	DET
fuelectenerg-7604	39	11	spring	spring	NOUN
fuelectenerg-7604	39	12	constant	constant	ADJ
fuelectenerg-7604	39	13	(	(	PUNCT
fuelectenerg-7604	39	14	k	k	NOUN
fuelectenerg-7604	39	15	)	)	PUNCT
fuelectenerg-7604	39	16	.	.	PUNCT
fuelectenerg-7604	40	1	the	the	DET
fuelectenerg-7604	40	2	mathematical	mathematical	ADJ
fuelectenerg-7604	40	3	equation	equation	NOUN
fuelectenerg-7604	40	4	can	can	AUX
fuelectenerg-7604	40	5	be	be	AUX
fuelectenerg-7604	40	6	given	give	VERB
fuelectenerg-7604	40	7	as	as	ADP
fuelectenerg-7604	40	8	[	[	X
fuelectenerg-7604	40	9	15	15	NUM
fuelectenerg-7604	40	10	]	]	X
fuelectenerg-7604	40	11	,	,	PUNCT
fuelectenerg-7604	40	12	3	3	NUM
fuelectenerg-7604	40	13	34	34	NUM
fuelectenerg-7604	40	14	ewt	ewt	PROPN
fuelectenerg-7604	40	15	k	k	PROPN
fuelectenerg-7604	40	16	l	l	PROPN
fuelectenerg-7604	40	17	=	=	PUNCT
fuelectenerg-7604	40	18	(	(	PUNCT
fuelectenerg-7604	40	19	2	2	X
fuelectenerg-7604	40	20	)	)	PUNCT
fuelectenerg-7604	40	21	the	the	DET
fuelectenerg-7604	40	22	resonant	resonant	ADJ
fuelectenerg-7604	40	23	frequency	frequency	NOUN
fuelectenerg-7604	40	24	of	of	ADP
fuelectenerg-7604	40	25	the	the	DET
fuelectenerg-7604	40	26	cantilever	cantilever	NOUN
fuelectenerg-7604	40	27	membrane	membrane	NOUN
fuelectenerg-7604	40	28	can	can	AUX
fuelectenerg-7604	40	29	be	be	AUX
fuelectenerg-7604	40	30	written	write	VERB
fuelectenerg-7604	40	31	as	as	ADP
fuelectenerg-7604	40	32	0	0	NUM
fuelectenerg-7604	40	33	1	1	NUM
fuelectenerg-7604	40	34	2	2	NUM
fuelectenerg-7604	40	35	2	2	NUM
fuelectenerg-7604	40	36	r	r	NOUN
fuelectenerg-7604	40	37	k	k	NOUN
fuelectenerg-7604	41	1	f	f	X
fuelectenerg-7604	41	2	m	m	VERB
fuelectenerg-7604	41	3			PROPN
fuelectenerg-7604	41	4			PROPN
fuelectenerg-7604	41	5			NOUN
fuelectenerg-7604	41	6	=	=	SYM
fuelectenerg-7604	41	7	=	=	SYM
fuelectenerg-7604	41	8	(	(	PUNCT
fuelectenerg-7604	41	9	3	3	NUM
fuelectenerg-7604	41	10	)	)	PUNCT
fuelectenerg-7604	41	11	where	where	SCONJ
fuelectenerg-7604	41	12	,	,	PUNCT
fuelectenerg-7604	41	13	m	m	PROPN
fuelectenerg-7604	41	14	denotes	denote	NOUN
fuelectenerg-7604	41	15	membrane	membrane	NOUN
fuelectenerg-7604	41	16	mass	mass	NOUN
fuelectenerg-7604	41	17	is	be	AUX
fuelectenerg-7604	41	18	given	give	VERB
fuelectenerg-7604	41	19	as	as	ADP
fuelectenerg-7604	41	20	m	m	NOUN
fuelectenerg-7604	41	21	=	=	NOUN
fuelectenerg-7604	41	22	ρ*l*w*t	ρ*l*w*t	NOUN
fuelectenerg-7604	41	23	.	.	PUNCT
fuelectenerg-7604	42	1	the	the	DET
fuelectenerg-7604	42	2	time	time	NOUN
fuelectenerg-7604	42	3	required	require	VERB
fuelectenerg-7604	42	4	for	for	ADP
fuelectenerg-7604	42	5	the	the	DET
fuelectenerg-7604	42	6	mems	mem	NOUN
fuelectenerg-7604	42	7	switch	switch	NOUN
fuelectenerg-7604	42	8	to	to	PART
fuelectenerg-7604	42	9	come	come	VERB
fuelectenerg-7604	42	10	from	from	ADP
fuelectenerg-7604	42	11	the	the	DET
fuelectenerg-7604	42	12	up	up	ADJ
fuelectenerg-7604	42	13	state	state	NOUN
fuelectenerg-7604	42	14	to	to	ADP
fuelectenerg-7604	42	15	the	the	DET
fuelectenerg-7604	42	16	down	down	ADJ
fuelectenerg-7604	42	17	state	state	NOUN
fuelectenerg-7604	42	18	is	be	AUX
fuelectenerg-7604	42	19	known	know	VERB
fuelectenerg-7604	42	20	as	as	ADP
fuelectenerg-7604	42	21	the	the	DET
fuelectenerg-7604	42	22	switching	switching	NOUN
fuelectenerg-7604	42	23	time	time	NOUN
fuelectenerg-7604	42	24	.	.	PUNCT
fuelectenerg-7604	43	1	for	for	ADP
fuelectenerg-7604	43	2	an	an	DET
fuelectenerg-7604	43	3	electrostatically	electrostatically	ADV
fuelectenerg-7604	43	4	actuated	actuate	VERB
fuelectenerg-7604	43	5	mems	mem	NOUN
fuelectenerg-7604	43	6	switch	switch	NOUN
fuelectenerg-7604	43	7	,	,	PUNCT
fuelectenerg-7604	43	8	the	the	DET
fuelectenerg-7604	43	9	switching	switching	NOUN
fuelectenerg-7604	43	10	time	time	NOUN
fuelectenerg-7604	43	11	can	can	AUX
fuelectenerg-7604	43	12	be	be	AUX
fuelectenerg-7604	43	13	expressed	express	VERB
fuelectenerg-7604	43	14	as	as	ADP
fuelectenerg-7604	43	15	0	0	NUM
fuelectenerg-7604	43	16	3.67	3.67	NUM
fuelectenerg-7604	43	17	pull	pull	NOUN
fuelectenerg-7604	43	18	in	in	ADP
fuelectenerg-7604	43	19	s	s	PROPN
fuelectenerg-7604	43	20	s	s	X
fuelectenerg-7604	43	21	v	v	ADP
fuelectenerg-7604	43	22	t	t	NOUN
fuelectenerg-7604	43	23	v	v	ADP
fuelectenerg-7604	43	24			PROPN
fuelectenerg-7604	43	25	−	−	PROPN
fuelectenerg-7604	43	26			X
fuelectenerg-7604	43	27	(	(	PUNCT
fuelectenerg-7604	43	28	4	4	NUM
fuelectenerg-7604	43	29	)	)	PUNCT
fuelectenerg-7604	43	30	the	the	DET
fuelectenerg-7604	43	31	capacitive	capacitive	ADJ
fuelectenerg-7604	43	32	switch	switch	NOUN
fuelectenerg-7604	43	33	insertion	insertion	NOUN
fuelectenerg-7604	43	34	and	and	CCONJ
fuelectenerg-7604	43	35	the	the	DET
fuelectenerg-7604	43	36	isolation	isolation	NOUN
fuelectenerg-7604	43	37	properties	property	NOUN
fuelectenerg-7604	43	38	truly	truly	ADV
fuelectenerg-7604	43	39	depend	depend	VERB
fuelectenerg-7604	43	40	on	on	ADP
fuelectenerg-7604	43	41	the	the	DET
fuelectenerg-7604	43	42	switch	switch	NOUN
fuelectenerg-7604	43	43	capacitance	capacitance	NOUN
fuelectenerg-7604	43	44	ratio	ratio	NOUN
fuelectenerg-7604	43	45	.	.	PUNCT
fuelectenerg-7604	44	1	the	the	DET
fuelectenerg-7604	44	2	rf	rf	NOUN
fuelectenerg-7604	44	3	mems	mems	PROPN
fuelectenerg-7604	44	4	switch	switch	VERB
fuelectenerg-7604	44	5	upstate	upstate	NOUN
fuelectenerg-7604	44	6	and	and	CCONJ
fuelectenerg-7604	44	7	down	down	ADJ
fuelectenerg-7604	44	8	state	state	NOUN
fuelectenerg-7604	44	9	capacitance	capacitance	NOUN
fuelectenerg-7604	44	10	can	can	AUX
fuelectenerg-7604	44	11	be	be	AUX
fuelectenerg-7604	44	12	expresses	express	NOUN
fuelectenerg-7604	44	13	as	as	ADP
fuelectenerg-7604	44	14	[	[	X
fuelectenerg-7604	44	15	16	16	NUM
fuelectenerg-7604	44	16	]	]	PUNCT
fuelectenerg-7604	44	17	,	,	PUNCT
fuelectenerg-7604	44	18	0	0	NUM
fuelectenerg-7604	44	19	1	1	NUM
fuelectenerg-7604	44	20	up	up	ADV
fuelectenerg-7604	44	21	d	d	NOUN
fuelectenerg-7604	44	22	r	r	NOUN
fuelectenerg-7604	44	23	a	a	PRON
fuelectenerg-7604	44	24	c	c	NOUN
fuelectenerg-7604	44	25	t	t	NOUN
fuelectenerg-7604	44	26	g	g	PROPN
fuelectenerg-7604	44	27			PROPN
fuelectenerg-7604	44	28			PROPN
fuelectenerg-7604	44	29	=	=	PUNCT
fuelectenerg-7604	45	1	+	+	CCONJ
fuelectenerg-7604	45	2	(	(	PUNCT
fuelectenerg-7604	45	3	5	5	NUM
fuelectenerg-7604	45	4	)	)	PUNCT
fuelectenerg-7604	45	5	0	0	NUM
fuelectenerg-7604	46	1	r	r	NOUN
fuelectenerg-7604	46	2	down	down	ADV
fuelectenerg-7604	46	3	d	d	PROPN
fuelectenerg-7604	46	4	a	a	DET
fuelectenerg-7604	46	5	c	c	NOUN
fuelectenerg-7604	46	6	t	t	NOUN
fuelectenerg-7604	46	7			PROPN
fuelectenerg-7604	46	8			PROPN
fuelectenerg-7604	46	9	=	=	PUNCT
fuelectenerg-7604	46	10	(	(	PUNCT
fuelectenerg-7604	46	11	6	6	NUM
fuelectenerg-7604	46	12	)	)	PUNCT
fuelectenerg-7604	46	13	'	'	PUNCT
fuelectenerg-7604	46	14	a	a	PRON
fuelectenerg-7604	46	15	'	'	PUNCT
fuelectenerg-7604	46	16	is	be	AUX
fuelectenerg-7604	46	17	the	the	DET
fuelectenerg-7604	46	18	cross	cross	ADJ
fuelectenerg-7604	46	19	sectional	sectional	ADJ
fuelectenerg-7604	46	20	area	area	NOUN
fuelectenerg-7604	46	21	among	among	ADP
fuelectenerg-7604	46	22	the	the	DET
fuelectenerg-7604	46	23	membrane	membrane	NOUN
fuelectenerg-7604	46	24	and	and	CCONJ
fuelectenerg-7604	46	25	the	the	DET
fuelectenerg-7604	46	26	cpw	cpw	NOUN
fuelectenerg-7604	46	27	strip	strip	NOUN
fuelectenerg-7604	46	28	,	,	PUNCT
fuelectenerg-7604	46	29	and	and	CCONJ
fuelectenerg-7604	46	30	‘	'	PUNCT
fuelectenerg-7604	46	31	td	td	NOUN
fuelectenerg-7604	46	32	’	'	PUNCT
fuelectenerg-7604	46	33	is	be	AUX
fuelectenerg-7604	46	34	the	the	DET
fuelectenerg-7604	46	35	dielectric	dielectric	ADJ
fuelectenerg-7604	46	36	thin	thin	ADJ
fuelectenerg-7604	46	37	film	film	NOUN
fuelectenerg-7604	46	38	thickness	thickness	NOUN
fuelectenerg-7604	46	39	.	.	PUNCT
fuelectenerg-7604	47	1	in	in	ADP
fuelectenerg-7604	47	2	terms	term	NOUN
fuelectenerg-7604	47	3	of	of	ADP
fuelectenerg-7604	47	4	the	the	DET
fuelectenerg-7604	47	5	return	return	NOUN
fuelectenerg-7604	47	6	loss	loss	NOUN
fuelectenerg-7604	47	7	and	and	CCONJ
fuelectenerg-7604	47	8	the	the	DET
fuelectenerg-7604	47	9	upstate	upstate	ADJ
fuelectenerg-7604	47	10	and	and	CCONJ
fuelectenerg-7604	47	11	downstate	downstate	PROPN
fuelectenerg-7604	47	12	capacitance	capacitance	NOUN
fuelectenerg-7604	47	13	the	the	DET
fuelectenerg-7604	47	14	insertion	insertion	NOUN
fuelectenerg-7604	47	15	losses	loss	NOUN
fuelectenerg-7604	47	16	(	(	PUNCT
fuelectenerg-7604	47	17	s21	s21	NOUN
fuelectenerg-7604	47	18	)	)	PUNCT
fuelectenerg-7604	47	19	can	can	AUX
fuelectenerg-7604	47	20	be	be	AUX
fuelectenerg-7604	47	21	expressed	express	VERB
fuelectenerg-7604	47	22	as	as	ADP
fuelectenerg-7604	47	23	2	2	NUM
fuelectenerg-7604	47	24	2	2	NUM
fuelectenerg-7604	47	25	21	21	NUM
fuelectenerg-7604	47	26	2	2	NUM
fuelectenerg-7604	47	27	11	11	NUM
fuelectenerg-7604	47	28	1	1	NUM
fuelectenerg-7604	47	29	up	up	ADV
fuelectenerg-7604	47	30	down	down	ADP
fuelectenerg-7604	47	31	c	c	PROPN
fuelectenerg-7604	47	32	s	s	PROPN
fuelectenerg-7604	48	1	cs	cs	PROPN
fuelectenerg-7604	48	2			NOUN
fuelectenerg-7604	48	3			PROPN
fuelectenerg-7604	48	4	=	=	SYM
fuelectenerg-7604	48	5			PROPN
fuelectenerg-7604	48	6			PROPN
fuelectenerg-7604	49	1			PROPN
fuelectenerg-7604	49	2			NOUN
fuelectenerg-7604	49	3	(	(	PUNCT
fuelectenerg-7604	49	4	7	7	NUM
fuelectenerg-7604	49	5	)	)	PUNCT
fuelectenerg-7604	49	6	the	the	DET
fuelectenerg-7604	49	7	isolation	isolation	NOUN
fuelectenerg-7604	49	8	losses	loss	NOUN
fuelectenerg-7604	49	9	(	(	PUNCT
fuelectenerg-7604	49	10	s21	s21	NOUN
fuelectenerg-7604	49	11	)	)	PUNCT
fuelectenerg-7604	49	12	depend	depend	VERB
fuelectenerg-7604	49	13	on	on	ADP
fuelectenerg-7604	49	14	the	the	DET
fuelectenerg-7604	49	15	characteristic	characteristic	ADJ
fuelectenerg-7604	49	16	impedance	impedance	NOUN
fuelectenerg-7604	49	17	and	and	CCONJ
fuelectenerg-7604	49	18	the	the	DET
fuelectenerg-7604	49	19	rf	rf	NOUN
fuelectenerg-7604	49	20	frequency	frequency	NOUN
fuelectenerg-7604	49	21	(	(	PUNCT
fuelectenerg-7604	49	22	f0	f0	PROPN
fuelectenerg-7604	49	23	)	)	PUNCT
fuelectenerg-7604	49	24	of	of	ADP
fuelectenerg-7604	49	25	the	the	DET
fuelectenerg-7604	49	26	switch	switch	NOUN
fuelectenerg-7604	49	27	and	and	CCONJ
fuelectenerg-7604	49	28	can	can	AUX
fuelectenerg-7604	49	29	be	be	AUX
fuelectenerg-7604	49	30	expressed	express	VERB
fuelectenerg-7604	49	31	as	as	ADP
fuelectenerg-7604	49	32	02	02	NUM
fuelectenerg-7604	49	33	2	2	NUM
fuelectenerg-7604	49	34	2	2	NUM
fuelectenerg-7604	49	35	0	0	NUM
fuelectenerg-7604	49	36	2	2	NUM
fuelectenerg-7604	49	37	2	2	NUM
fuelectenerg-7604	49	38	21	21	NUM
fuelectenerg-7604	49	39	02	02	NUM
fuelectenerg-7604	49	40	0	0	NUM
fuelectenerg-7604	49	41	2	2	NUM
fuelectenerg-7604	49	42	2	2	NUM
fuelectenerg-7604	49	43	02	02	NUM
fuelectenerg-7604	49	44	0	0	NUM
fuelectenerg-7604	49	45	4	4	NUM
fuelectenerg-7604	49	46	4	4	NUM
fuelectenerg-7604	49	47	4	4	NUM
fuelectenerg-7604	49	48	down	down	ADP
fuelectenerg-7604	49	49	s	s	NOUN
fuelectenerg-7604	49	50	for	for	ADP
fuelectenerg-7604	49	51	f	f	PROPN
fuelectenerg-7604	49	52	f	f	PROPN
fuelectenerg-7604	49	53	c	c	PROPN
fuelectenerg-7604	49	54	z	z	NOUN
fuelectenerg-7604	49	55	r	r	NOUN
fuelectenerg-7604	49	56	s	s	PROPN
fuelectenerg-7604	49	57	for	for	ADP
fuelectenerg-7604	49	58	f	f	PROPN
fuelectenerg-7604	49	59	f	f	PROPN
fuelectenerg-7604	49	60	z	z	PROPN
fuelectenerg-7604	49	61	l	l	PROPN
fuelectenerg-7604	49	62	for	for	ADP
fuelectenerg-7604	49	63	f	f	PROPN
fuelectenerg-7604	50	1	f	f	PROPN
fuelectenerg-7604	50	2	z	z	PROPN
fuelectenerg-7604	50	3			X
fuelectenerg-7604	51	1			X
fuelectenerg-7604	51	2			ADV
fuelectenerg-7604	51	3			NUM
fuelectenerg-7604	51	4			NUM
fuelectenerg-7604	51	5			NUM
fuelectenerg-7604	51	6			NUM
fuelectenerg-7604	51	7	=	=	SYM
fuelectenerg-7604	51	8			PROPN
fuelectenerg-7604	51	9			NUM
fuelectenerg-7604	51	10			NUM
fuelectenerg-7604	51	11			NUM
fuelectenerg-7604	51	12			PROPN
fuelectenerg-7604	52	1			NUM
fuelectenerg-7604	52	2			PROPN
fuelectenerg-7604	52	3	(	(	PUNCT
fuelectenerg-7604	52	4	8)	8)	NUM
fuelectenerg-7604	52	5	384	384	NUM
fuelectenerg-7604	52	6	l.	l.	PROPN
fuelectenerg-7604	52	7	n.	n.	PROPN
fuelectenerg-7604	52	8	thalluri	thalluri	PROPN
fuelectenerg-7604	52	9	,	,	PUNCT
fuelectenerg-7604	52	10	k	k	PROPN
fuelectenerg-7604	52	11	v	v	PROPN
fuelectenerg-7604	52	12	v	v	X
fuelectenerg-7604	52	13	kumar	kumar	PROPN
fuelectenerg-7604	52	14	,	,	PUNCT
fuelectenerg-7604	52	15	k.	k.	PROPN
fuelectenerg-7604	52	16	r.	r.	PROPN
fuelectenerg-7604	52	17	sekhar	sekhar	PROPN
fuelectenerg-7604	52	18	,	,	PUNCT
fuelectenerg-7604	52	19	n	n	PROPN
fuelectenerg-7604	52	20	b	b	PROPN
fuelectenerg-7604	52	21	babu	babu	PROPN
fuelectenerg-7604	52	22	d.3	d.3	PROPN
fuelectenerg-7604	52	23	,	,	PUNCT
fuelectenerg-7604	52	24	s	s	PART
fuelectenerg-7604	52	25	s	s	X
fuelectenerg-7604	52	26	kiran	kiran	NOUN
fuelectenerg-7604	52	27	,	,	PUNCT
fuelectenerg-7604	52	28	k.	k.	PROPN
fuelectenerg-7604	52	29	guha	guha	PROPN
fuelectenerg-7604	52	30	4	4	X
fuelectenerg-7604	52	31	.	.	PUNCT
fuelectenerg-7604	52	32	membrane	membrane	NOUN
fuelectenerg-7604	52	33	iterative	iterative	NOUN
fuelectenerg-7604	52	34	analysis	analysis	NOUN
fuelectenerg-7604	52	35	a	a	DET
fuelectenerg-7604	52	36	rectangular	rectangular	ADJ
fuelectenerg-7604	52	37	cantilever	cantilever	NOUN
fuelectenerg-7604	52	38	structure	structure	NOUN
fuelectenerg-7604	52	39	as	as	SCONJ
fuelectenerg-7604	52	40	shown	show	VERB
fuelectenerg-7604	52	41	in	in	ADP
fuelectenerg-7604	52	42	fig	fig	NOUN
fuelectenerg-7604	52	43	.	.	PUNCT
fuelectenerg-7604	53	1	2	2	NUM
fuelectenerg-7604	53	2	,	,	PUNCT
fuelectenerg-7604	53	3	is	be	AUX
fuelectenerg-7604	53	4	considered	consider	VERB
fuelectenerg-7604	53	5	from	from	ADP
fuelectenerg-7604	53	6	the	the	DET
fuelectenerg-7604	53	7	point	point	NOUN
fuelectenerg-7604	53	8	of	of	ADP
fuelectenerg-7604	53	9	view	view	NOUN
fuelectenerg-7604	53	10	of	of	ADP
fuelectenerg-7604	53	11	the	the	DET
fuelectenerg-7604	53	12	desired	desire	VERB
fuelectenerg-7604	53	13	radio	radio	NOUN
fuelectenerg-7604	53	14	frequency	frequency	NOUN
fuelectenerg-7604	53	15	requirement	requirement	NOUN
fuelectenerg-7604	53	16	.	.	PUNCT
fuelectenerg-7604	54	1	its	its	PRON
fuelectenerg-7604	54	2	dimensions	dimension	NOUN
fuelectenerg-7604	54	3	are	be	AUX
fuelectenerg-7604	54	4	given	give	VERB
fuelectenerg-7604	54	5	in	in	ADP
fuelectenerg-7604	54	6	table	table	NOUN
fuelectenerg-7604	54	7	1	1	NUM
fuelectenerg-7604	54	8	.	.	PUNCT
fuelectenerg-7604	55	1	we	we	PRON
fuelectenerg-7604	55	2	have	have	AUX
fuelectenerg-7604	55	3	performed	perform	VERB
fuelectenerg-7604	55	4	the	the	DET
fuelectenerg-7604	55	5	iterative	iterative	ADJ
fuelectenerg-7604	55	6	analysis	analysis	NOUN
fuelectenerg-7604	55	7	which	which	PRON
fuelectenerg-7604	55	8	helped	help	VERB
fuelectenerg-7604	55	9	decrease	decrease	VERB
fuelectenerg-7604	55	10	the	the	DET
fuelectenerg-7604	55	11	required	require	VERB
fuelectenerg-7604	55	12	actuation	actuation	NOUN
fuelectenerg-7604	55	13	voltage	voltage	NOUN
fuelectenerg-7604	55	14	.	.	PUNCT
fuelectenerg-7604	56	1	fig	fig	NOUN
fuelectenerg-7604	56	2	.	.	PUNCT
fuelectenerg-7604	57	1	2	2	NUM
fuelectenerg-7604	57	2	performance	performance	NOUN
fuelectenerg-7604	57	3	improved	improve	VERB
fuelectenerg-7604	57	4	cantilever	cantilever	NOUN
fuelectenerg-7604	57	5	structure	structure	NOUN
fuelectenerg-7604	57	6	with	with	ADP
fuelectenerg-7604	57	7	bottom	bottom	ADJ
fuelectenerg-7604	57	8	electrode	electrode	NOUN
fuelectenerg-7604	57	9	.	.	PUNCT
fuelectenerg-7604	58	1	table	table	NOUN
fuelectenerg-7604	58	2	1	1	NUM
fuelectenerg-7604	58	3	performance	performance	NOUN
fuelectenerg-7604	58	4	improved	improve	VERB
fuelectenerg-7604	58	5	cantilever	cantilever	NOUN
fuelectenerg-7604	58	6	structure	structure	NOUN
fuelectenerg-7604	58	7	dimensions	dimension	NOUN
fuelectenerg-7604	58	8	.	.	PUNCT
fuelectenerg-7604	59	1	parameter	parameter	PROPN
fuelectenerg-7604	59	2	variable	variable	ADJ
fuelectenerg-7604	59	3	value	value	NOUN
fuelectenerg-7604	59	4	(	(	PUNCT
fuelectenerg-7604	59	5	µm	µm	NOUN
fuelectenerg-7604	59	6	)	)	PUNCT
fuelectenerg-7604	59	7	cantilever	cantilever	NOUN
fuelectenerg-7604	59	8	cl	cl	NOUN
fuelectenerg-7604	59	9	220	220	NUM
fuelectenerg-7604	59	10	cw	cw	NOUN
fuelectenerg-7604	59	11	200	200	NUM
fuelectenerg-7604	59	12	ct	ct	NUM
fuelectenerg-7604	59	13	0.5	0.5	NUM
fuelectenerg-7604	59	14	slot1	slot1	PROPN
fuelectenerg-7604	59	15	l	l	PROPN
fuelectenerg-7604	59	16	10	10	NUM
fuelectenerg-7604	59	17	w	w	PROPN
fuelectenerg-7604	59	18	160	160	NUM
fuelectenerg-7604	59	19	slot2	slot2	PROPN
fuelectenerg-7604	59	20	l	l	NOUN
fuelectenerg-7604	59	21	5	5	NUM
fuelectenerg-7604	59	22	w	w	NOUN
fuelectenerg-7604	59	23	180	180	NUM
fuelectenerg-7604	59	24	perforation	perforation	NOUN
fuelectenerg-7604	59	25	-5x5	-5x5	ADP
fuelectenerg-7604	59	26	bottom	bottom	ADJ
fuelectenerg-7604	59	27	electrode	electrode	NOUN
fuelectenerg-7604	59	28	(	(	PUNCT
fuelectenerg-7604	59	29	be	be	AUX
fuelectenerg-7604	59	30	)	)	PUNCT
fuelectenerg-7604	59	31	bel	bel	NOUN
fuelectenerg-7604	59	32	120	120	NUM
fuelectenerg-7604	59	33	bew	bew	VERB
fuelectenerg-7604	59	34	200	200	NUM
fuelectenerg-7604	59	35	bet	bet	NOUN
fuelectenerg-7604	59	36	0.6	0.6	NUM
fuelectenerg-7604	60	1	overall	overall	ADV
fuelectenerg-7604	60	2	we	we	PRON
fuelectenerg-7604	60	3	have	have	AUX
fuelectenerg-7604	60	4	performed	perform	VERB
fuelectenerg-7604	60	5	the	the	DET
fuelectenerg-7604	60	6	multiple	multiple	ADJ
fuelectenerg-7604	60	7	iterations	iteration	NOUN
fuelectenerg-7604	60	8	on	on	ADP
fuelectenerg-7604	60	9	cantilever	cantilever	NOUN
fuelectenerg-7604	60	10	membrane	membrane	NOUN
fuelectenerg-7604	60	11	by	by	ADP
fuelectenerg-7604	60	12	varying	vary	VERB
fuelectenerg-7604	60	13	the	the	DET
fuelectenerg-7604	60	14	membrane	membrane	NOUN
fuelectenerg-7604	60	15	thickness	thickness	NOUN
fuelectenerg-7604	60	16	,	,	PUNCT
fuelectenerg-7604	60	17	by	by	ADP
fuelectenerg-7604	60	18	placing	place	VERB
fuelectenerg-7604	60	19	slots	slot	NOUN
fuelectenerg-7604	60	20	and	and	CCONJ
fuelectenerg-7604	60	21	by	by	ADP
fuelectenerg-7604	60	22	incorporating	incorporate	VERB
fuelectenerg-7604	60	23	the	the	DET
fuelectenerg-7604	60	24	perforation	perforation	NOUN
fuelectenerg-7604	60	25	.	.	PUNCT
fuelectenerg-7604	61	1	the	the	DET
fuelectenerg-7604	61	2	iterations	iteration	NOUN
fuelectenerg-7604	61	3	are	be	AUX
fuelectenerg-7604	61	4	started	start	VERB
fuelectenerg-7604	61	5	with	with	ADP
fuelectenerg-7604	61	6	220	220	NUM
fuelectenerg-7604	61	7	µm	µm	ADP
fuelectenerg-7604	61	8	length	length	NOUN
fuelectenerg-7604	61	9	,	,	PUNCT
fuelectenerg-7604	61	10	200	200	NUM
fuelectenerg-7604	61	11	µm	µm	NOUN
fuelectenerg-7604	61	12	width	width	ADJ
fuelectenerg-7604	61	13	and	and	CCONJ
fuelectenerg-7604	61	14	1	1	NUM
fuelectenerg-7604	61	15	µm	µm	ADP
fuelectenerg-7604	61	16	thickness	thickness	NOUN
fuelectenerg-7604	61	17	cantilever	cantilever	NOUN
fuelectenerg-7604	61	18	designed	design	VERB
fuelectenerg-7604	61	19	with	with	ADP
fuelectenerg-7604	61	20	gold	gold	NOUN
fuelectenerg-7604	61	21	material	material	NOUN
fuelectenerg-7604	61	22	as	as	SCONJ
fuelectenerg-7604	61	23	shown	show	VERB
fuelectenerg-7604	61	24	in	in	ADP
fuelectenerg-7604	61	25	fig	fig	NOUN
fuelectenerg-7604	61	26	.	.	PUNCT
fuelectenerg-7604	62	1	3	3	X
fuelectenerg-7604	62	2	.	.	X
fuelectenerg-7604	62	3	in	in	ADP
fuelectenerg-7604	62	4	the	the	DET
fuelectenerg-7604	62	5	design	design	NOUN
fuelectenerg-7604	62	6	of	of	ADP
fuelectenerg-7604	62	7	rf	rf	NOUN
fuelectenerg-7604	62	8	mems	mem	NOUN
fuelectenerg-7604	62	9	switches	switch	NOUN
fuelectenerg-7604	62	10	,	,	PUNCT
fuelectenerg-7604	62	11	the	the	DET
fuelectenerg-7604	62	12	validation	validation	NOUN
fuelectenerg-7604	62	13	of	of	ADP
fuelectenerg-7604	62	14	the	the	DET
fuelectenerg-7604	62	15	membrane	membrane	NOUN
fuelectenerg-7604	62	16	properties	property	NOUN
fuelectenerg-7604	62	17	is	be	AUX
fuelectenerg-7604	62	18	very	very	ADV
fuelectenerg-7604	62	19	important	important	ADJ
fuelectenerg-7604	62	20	.	.	PUNCT
fuelectenerg-7604	63	1	the	the	DET
fuelectenerg-7604	63	2	reliability	reliability	NOUN
fuelectenerg-7604	63	3	of	of	ADP
fuelectenerg-7604	63	4	the	the	DET
fuelectenerg-7604	63	5	switch	switch	NOUN
fuelectenerg-7604	63	6	depends	depend	VERB
fuelectenerg-7604	63	7	on	on	ADP
fuelectenerg-7604	63	8	the	the	DET
fuelectenerg-7604	63	9	multiple	multiple	ADJ
fuelectenerg-7604	63	10	parameters	parameter	NOUN
fuelectenerg-7604	63	11	in	in	ADP
fuelectenerg-7604	63	12	the	the	DET
fuelectenerg-7604	63	13	membrane	membrane	NOUN
fuelectenerg-7604	63	14	damping	damp	VERB
fuelectenerg-7604	63	15	analysis	analysis	NOUN
fuelectenerg-7604	63	16	.	.	PUNCT
fuelectenerg-7604	64	1	with	with	ADP
fuelectenerg-7604	64	2	the	the	DET
fuelectenerg-7604	64	3	primary	primary	ADJ
fuelectenerg-7604	64	4	goal	goal	NOUN
fuelectenerg-7604	64	5	of	of	ADP
fuelectenerg-7604	64	6	the	the	DET
fuelectenerg-7604	64	7	switch	switch	NOUN
fuelectenerg-7604	64	8	validation	validation	NOUN
fuelectenerg-7604	64	9	,	,	PUNCT
fuelectenerg-7604	64	10	we	we	PRON
fuelectenerg-7604	64	11	have	have	AUX
fuelectenerg-7604	64	12	considered	consider	VERB
fuelectenerg-7604	64	13	membrane	membrane	NOUN
fuelectenerg-7604	64	14	damping	damp	VERB
fuelectenerg-7604	64	15	in	in	ADP
fuelectenerg-7604	64	16	every	every	DET
fuelectenerg-7604	64	17	iteration	iteration	NOUN
fuelectenerg-7604	64	18	.	.	PUNCT
fuelectenerg-7604	65	1	on	on	ADP
fuelectenerg-7604	65	2	the	the	DET
fuelectenerg-7604	65	3	whole	whole	NOUN
fuelectenerg-7604	65	4	,	,	PUNCT
fuelectenerg-7604	65	5	we	we	PRON
fuelectenerg-7604	65	6	have	have	AUX
fuelectenerg-7604	65	7	observed	observe	VERB
fuelectenerg-7604	65	8	the	the	DET
fuelectenerg-7604	65	9	cantilever	cantilever	NOUN
fuelectenerg-7604	65	10	damping	damp	VERB
fuelectenerg-7604	65	11	up	up	ADP
fuelectenerg-7604	65	12	to	to	ADP
fuelectenerg-7604	65	13	8000	8000	NUM
fuelectenerg-7604	65	14	µs	µs	NOUN
fuelectenerg-7604	65	15	.	.	PUNCT
fuelectenerg-7604	66	1	in	in	ADP
fuelectenerg-7604	66	2	this	this	DET
fuelectenerg-7604	66	3	iterative	iterative	NOUN
fuelectenerg-7604	66	4	process	process	NOUN
fuelectenerg-7604	66	5	,	,	PUNCT
fuelectenerg-7604	66	6	we	we	PRON
fuelectenerg-7604	66	7	have	have	AUX
fuelectenerg-7604	66	8	noticed	notice	VERB
fuelectenerg-7604	66	9	a	a	DET
fuelectenerg-7604	66	10	few	few	ADJ
fuelectenerg-7604	66	11	important	important	ADJ
fuelectenerg-7604	66	12	points	point	NOUN
fuelectenerg-7604	66	13	i.e.	i.e.	ADV
fuelectenerg-7604	66	14	,	,	PUNCT
fuelectenerg-7604	66	15	the	the	DET
fuelectenerg-7604	66	16	incorporation	incorporation	NOUN
fuelectenerg-7604	66	17	of	of	ADP
fuelectenerg-7604	66	18	slots	slot	NOUN
fuelectenerg-7604	66	19	into	into	ADP
fuelectenerg-7604	66	20	the	the	DET
fuelectenerg-7604	66	21	membrane	membrane	NOUN
fuelectenerg-7604	66	22	leads	lead	VERB
fuelectenerg-7604	66	23	to	to	ADP
fuelectenerg-7604	66	24	an	an	DET
fuelectenerg-7604	66	25	increase	increase	NOUN
fuelectenerg-7604	66	26	in	in	ADP
fuelectenerg-7604	66	27	the	the	DET
fuelectenerg-7604	66	28	damping	damp	VERB
fuelectenerg-7604	66	29	duration	duration	NOUN
fuelectenerg-7604	66	30	but	but	CCONJ
fuelectenerg-7604	66	31	also	also	ADV
fuelectenerg-7604	66	32	helps	help	VERB
fuelectenerg-7604	66	33	to	to	PART
fuelectenerg-7604	66	34	reduce	reduce	VERB
fuelectenerg-7604	66	35	the	the	DET
fuelectenerg-7604	66	36	actuation	actuation	NOUN
fuelectenerg-7604	66	37	voltage	voltage	NOUN
fuelectenerg-7604	66	38	.	.	PUNCT
fuelectenerg-7604	67	1	incorporating	incorporate	VERB
fuelectenerg-7604	67	2	holes	hole	NOUN
fuelectenerg-7604	67	3	into	into	ADP
fuelectenerg-7604	67	4	the	the	DET
fuelectenerg-7604	67	5	membrane	membrane	NOUN
fuelectenerg-7604	67	6	helps	help	VERB
fuelectenerg-7604	67	7	to	to	PART
fuelectenerg-7604	67	8	reduce	reduce	VERB
fuelectenerg-7604	67	9	the	the	DET
fuelectenerg-7604	67	10	damping	damp	VERB
fuelectenerg-7604	67	11	duration	duration	NOUN
fuelectenerg-7604	67	12	but	but	CCONJ
fuelectenerg-7604	67	13	at	at	ADP
fuelectenerg-7604	67	14	the	the	DET
fuelectenerg-7604	67	15	same	same	ADJ
fuelectenerg-7604	67	16	time	time	NOUN
fuelectenerg-7604	67	17	it	it	PRON
fuelectenerg-7604	67	18	leads	lead	VERB
fuelectenerg-7604	67	19	to	to	ADP
fuelectenerg-7604	67	20	an	an	DET
fuelectenerg-7604	67	21	increase	increase	NOUN
fuelectenerg-7604	67	22	of	of	ADP
fuelectenerg-7604	67	23	the	the	DET
fuelectenerg-7604	67	24	actuation	actuation	NOUN
fuelectenerg-7604	67	25	voltage	voltage	NOUN
fuelectenerg-7604	67	26	.	.	PUNCT
fuelectenerg-7604	68	1	damping	damp	VERB
fuelectenerg-7604	68	2	analysis	analysis	NOUN
fuelectenerg-7604	68	3	to	to	PART
fuelectenerg-7604	68	4	improve	improve	VERB
fuelectenerg-7604	68	5	the	the	DET
fuelectenerg-7604	68	6	performance	performance	NOUN
fuelectenerg-7604	68	7	of	of	ADP
fuelectenerg-7604	68	8	shunt	shunt	NOUN
fuelectenerg-7604	68	9	capacitive	capacitive	ADJ
fuelectenerg-7604	68	10	rf	rf	NOUN
fuelectenerg-7604	68	11	mems	mem	NOUN
fuelectenerg-7604	68	12	switch	switch	VERB
fuelectenerg-7604	68	13	385	385	NUM
fuelectenerg-7604	68	14	386	386	NUM
fuelectenerg-7604	68	15	l.	l.	PROPN
fuelectenerg-7604	68	16	n.	n.	PROPN
fuelectenerg-7604	68	17	thalluri	thalluri	PROPN
fuelectenerg-7604	68	18	,	,	PUNCT
fuelectenerg-7604	68	19	k	k	PROPN
fuelectenerg-7604	68	20	v	v	PROPN
fuelectenerg-7604	68	21	v	v	X
fuelectenerg-7604	68	22	kumar	kumar	PROPN
fuelectenerg-7604	68	23	,	,	PUNCT
fuelectenerg-7604	68	24	k.	k.	PROPN
fuelectenerg-7604	68	25	r.	r.	PROPN
fuelectenerg-7604	68	26	sekhar	sekhar	PROPN
fuelectenerg-7604	68	27	,	,	PUNCT
fuelectenerg-7604	68	28	n	n	PROPN
fuelectenerg-7604	68	29	b	b	PROPN
fuelectenerg-7604	68	30	babu	babu	PROPN
fuelectenerg-7604	68	31	d.3	d.3	PROPN
fuelectenerg-7604	68	32	,	,	PUNCT
fuelectenerg-7604	68	33	s	s	PART
fuelectenerg-7604	68	34	s	s	X
fuelectenerg-7604	68	35	kiran	kiran	NOUN
fuelectenerg-7604	68	36	,	,	PUNCT
fuelectenerg-7604	68	37	k.	k.	PROPN
fuelectenerg-7604	68	38	guha	guha	PROPN
fuelectenerg-7604	68	39	fig	fig	PROPN
fuelectenerg-7604	68	40	.	.	PUNCT
fuelectenerg-7604	69	1	3	3	NUM
fuelectenerg-7604	69	2	cantilever	cantilever	NOUN
fuelectenerg-7604	69	3	structure	structure	NOUN
fuelectenerg-7604	69	4	iterative	iterative	NOUN
fuelectenerg-7604	69	5	analysis	analysis	NOUN
fuelectenerg-7604	69	6	however	however	ADV
fuelectenerg-7604	69	7	,	,	PUNCT
fuelectenerg-7604	69	8	we	we	PRON
fuelectenerg-7604	69	9	have	have	AUX
fuelectenerg-7604	69	10	considered	consider	VERB
fuelectenerg-7604	69	11	the	the	DET
fuelectenerg-7604	69	12	6th	6th	ADJ
fuelectenerg-7604	69	13	iteration	iteration	NOUN
fuelectenerg-7604	69	14	membrane	membrane	NOUN
fuelectenerg-7604	69	15	for	for	ADP
fuelectenerg-7604	69	16	the	the	DET
fuelectenerg-7604	69	17	design	design	NOUN
fuelectenerg-7604	69	18	of	of	ADP
fuelectenerg-7604	69	19	the	the	DET
fuelectenerg-7604	69	20	final	final	ADJ
fuelectenerg-7604	69	21	rf	rf	ADJ
fuelectenerg-7604	69	22	mems	mem	NOUN
fuelectenerg-7604	69	23	switch	switch	NOUN
fuelectenerg-7604	69	24	i.e.	i.e.	ADV
fuelectenerg-7604	69	25	,	,	PUNCT
fuelectenerg-7604	69	26	a	a	DET
fuelectenerg-7604	69	27	gold	gold	NOUN
fuelectenerg-7604	69	28	membrane	membrane	NOUN
fuelectenerg-7604	69	29	with	with	ADP
fuelectenerg-7604	69	30	two	two	NUM
fuelectenerg-7604	69	31	slots	slot	NOUN
fuelectenerg-7604	69	32	,	,	PUNCT
fuelectenerg-7604	69	33	perforation	perforation	NOUN
fuelectenerg-7604	69	34	and	and	CCONJ
fuelectenerg-7604	69	35	0.7	0.7	NUM
fuelectenerg-7604	69	36	µm	µm	ADP
fuelectenerg-7604	69	37	thickness	thickness	NOUN
fuelectenerg-7604	69	38	.	.	PUNCT
fuelectenerg-7604	70	1	this	this	PRON
fuelectenerg-7604	70	2	requires	require	VERB
fuelectenerg-7604	70	3	an	an	DET
fuelectenerg-7604	70	4	actuation	actuation	NOUN
fuelectenerg-7604	70	5	voltage	voltage	NOUN
fuelectenerg-7604	70	6	of	of	ADP
fuelectenerg-7604	70	7	7.3	7.3	NUM
fuelectenerg-7604	70	8	v	v	NOUN
fuelectenerg-7604	70	9	for	for	ADP
fuelectenerg-7604	70	10	3	3	NUM
fuelectenerg-7604	70	11	µm	µm	ADP
fuelectenerg-7604	70	12	displacement	displacement	NOUN
fuelectenerg-7604	70	13	and	and	CCONJ
fuelectenerg-7604	70	14	switching	switch	VERB
fuelectenerg-7604	70	15	time	time	NOUN
fuelectenerg-7604	70	16	is	be	AUX
fuelectenerg-7604	70	17	110	110	NUM
fuelectenerg-7604	70	18	µs	µs	NOUN
fuelectenerg-7604	70	19	as	as	SCONJ
fuelectenerg-7604	70	20	shown	show	VERB
fuelectenerg-7604	70	21	in	in	ADP
fuelectenerg-7604	70	22	fig	fig	NOUN
fuelectenerg-7604	70	23	.	.	PUNCT
fuelectenerg-7604	71	1	4	4	X
fuelectenerg-7604	71	2	.	.	X
fuelectenerg-7604	71	3	damping	damp	VERB
fuelectenerg-7604	71	4	analysis	analysis	NOUN
fuelectenerg-7604	71	5	to	to	PART
fuelectenerg-7604	71	6	improve	improve	VERB
fuelectenerg-7604	71	7	the	the	DET
fuelectenerg-7604	71	8	performance	performance	NOUN
fuelectenerg-7604	71	9	of	of	ADP
fuelectenerg-7604	71	10	shunt	shunt	NOUN
fuelectenerg-7604	71	11	capacitive	capacitive	ADJ
fuelectenerg-7604	71	12	rf	rf	NOUN
fuelectenerg-7604	71	13	mems	mem	NOUN
fuelectenerg-7604	71	14	switch	switch	VERB
fuelectenerg-7604	71	15	387	387	NUM
fuelectenerg-7604	71	16	(	(	PUNCT
fuelectenerg-7604	71	17	a	a	NOUN
fuelectenerg-7604	71	18	)	)	PUNCT
fuelectenerg-7604	71	19	(	(	PUNCT
fuelectenerg-7604	71	20	b	b	X
fuelectenerg-7604	71	21	)	)	PUNCT
fuelectenerg-7604	71	22	fig	fig	NOUN
fuelectenerg-7604	71	23	.	.	PUNCT
fuelectenerg-7604	72	1	4	4	NUM
fuelectenerg-7604	72	2	cantilever	cantilever	NOUN
fuelectenerg-7604	72	3	membrane	membrane	NOUN
fuelectenerg-7604	72	4	,	,	PUNCT
fuelectenerg-7604	72	5	(	(	PUNCT
fuelectenerg-7604	72	6	a	a	X
fuelectenerg-7604	72	7	)	)	PUNCT
fuelectenerg-7604	72	8	the	the	DET
fuelectenerg-7604	72	9	displacement	displacement	ADJ
fuelectenerg-7604	72	10	distribution	distribution	NOUN
fuelectenerg-7604	72	11	under	under	ADP
fuelectenerg-7604	72	12	electrostatic	electrostatic	ADJ
fuelectenerg-7604	72	13	actuation	actuation	NOUN
fuelectenerg-7604	72	14	,	,	PUNCT
fuelectenerg-7604	72	15	(	(	PUNCT
fuelectenerg-7604	72	16	b	b	X
fuelectenerg-7604	72	17	)	)	PUNCT
fuelectenerg-7604	72	18	displacement	displacement	NOUN
fuelectenerg-7604	72	19	versus	versus	ADP
fuelectenerg-7604	72	20	switching	switch	VERB
fuelectenerg-7604	72	21	time	time	NOUN
fuelectenerg-7604	72	22	fig	fig	NOUN
fuelectenerg-7604	72	23	.	.	PUNCT
fuelectenerg-7604	73	1	5	5	NUM
fuelectenerg-7604	73	2	eigen	eigen	PROPN
fuelectenerg-7604	73	3	frequencies	frequency	NOUN
fuelectenerg-7604	73	4	388	388	NUM
fuelectenerg-7604	73	5	l.	l.	PROPN
fuelectenerg-7604	73	6	n.	n.	PROPN
fuelectenerg-7604	73	7	thalluri	thalluri	PROPN
fuelectenerg-7604	73	8	,	,	PUNCT
fuelectenerg-7604	73	9	k	k	PROPN
fuelectenerg-7604	73	10	v	v	PROPN
fuelectenerg-7604	73	11	v	v	X
fuelectenerg-7604	73	12	kumar	kumar	PROPN
fuelectenerg-7604	73	13	,	,	PUNCT
fuelectenerg-7604	73	14	k.	k.	PROPN
fuelectenerg-7604	73	15	r.	r.	PROPN
fuelectenerg-7604	73	16	sekhar	sekhar	PROPN
fuelectenerg-7604	73	17	,	,	PUNCT
fuelectenerg-7604	73	18	n	n	PROPN
fuelectenerg-7604	73	19	b	b	PROPN
fuelectenerg-7604	73	20	babu	babu	PROPN
fuelectenerg-7604	73	21	d.3	d.3	PROPN
fuelectenerg-7604	73	22	,	,	PUNCT
fuelectenerg-7604	73	23	s	s	PART
fuelectenerg-7604	73	24	s	s	X
fuelectenerg-7604	73	25	kiran	kiran	NOUN
fuelectenerg-7604	73	26	,	,	PUNCT
fuelectenerg-7604	73	27	k.	k.	PROPN
fuelectenerg-7604	73	28	guha	guha	PROPN
fuelectenerg-7604	73	29	in	in	ADP
fuelectenerg-7604	73	30	the	the	DET
fuelectenerg-7604	73	31	rf	rf	NOUN
fuelectenerg-7604	73	32	mems	mem	NOUN
fuelectenerg-7604	73	33	switch	switch	NOUN
fuelectenerg-7604	73	34	performance	performance	NOUN
fuelectenerg-7604	73	35	analysis	analysis	NOUN
fuelectenerg-7604	73	36	,	,	PUNCT
fuelectenerg-7604	73	37	eigen	eigen	PROPN
fuelectenerg-7604	73	38	frequencies	frequency	NOUN
fuelectenerg-7604	73	39	help	help	VERB
fuelectenerg-7604	73	40	to	to	PART
fuelectenerg-7604	73	41	analyze	analyze	VERB
fuelectenerg-7604	73	42	the	the	DET
fuelectenerg-7604	73	43	deformation	deformation	NOUN
fuelectenerg-7604	73	44	of	of	ADP
fuelectenerg-7604	73	45	the	the	DET
fuelectenerg-7604	73	46	membrane	membrane	NOUN
fuelectenerg-7604	73	47	during	during	ADP
fuelectenerg-7604	73	48	electrostatic	electrostatic	ADJ
fuelectenerg-7604	73	49	actuation	actuation	NOUN
fuelectenerg-7604	73	50	as	as	SCONJ
fuelectenerg-7604	73	51	shown	show	VERB
fuelectenerg-7604	73	52	in	in	ADP
fuelectenerg-7604	73	53	fig.5	fig.5	PROPN
fuelectenerg-7604	73	54	.	.	PUNCT
fuelectenerg-7604	74	1	the	the	DET
fuelectenerg-7604	74	2	real	real	ADJ
fuelectenerg-7604	74	3	advantage	advantage	NOUN
fuelectenerg-7604	74	4	of	of	ADP
fuelectenerg-7604	74	5	introducing	introduce	VERB
fuelectenerg-7604	74	6	holes	hole	NOUN
fuelectenerg-7604	74	7	into	into	ADP
fuelectenerg-7604	74	8	the	the	DET
fuelectenerg-7604	74	9	membrane	membrane	NOUN
fuelectenerg-7604	74	10	is	be	AUX
fuelectenerg-7604	74	11	that	that	SCONJ
fuelectenerg-7604	74	12	it	it	PRON
fuelectenerg-7604	74	13	helps	help	VERB
fuelectenerg-7604	74	14	to	to	PART
fuelectenerg-7604	74	15	improve	improve	VERB
fuelectenerg-7604	74	16	the	the	DET
fuelectenerg-7604	74	17	insertion	insertion	NOUN
fuelectenerg-7604	74	18	properties	property	NOUN
fuelectenerg-7604	74	19	of	of	ADP
fuelectenerg-7604	74	20	the	the	DET
fuelectenerg-7604	74	21	switch	switch	NOUN
fuelectenerg-7604	74	22	.	.	PUNCT
fuelectenerg-7604	75	1	this	this	PRON
fuelectenerg-7604	75	2	facilitates	facilitate	VERB
fuelectenerg-7604	75	3	the	the	DET
fuelectenerg-7604	75	4	electrostatic	electrostatic	ADJ
fuelectenerg-7604	75	5	actuation	actuation	NOUN
fuelectenerg-7604	75	6	and	and	CCONJ
fuelectenerg-7604	75	7	at	at	ADP
fuelectenerg-7604	75	8	the	the	DET
fuelectenerg-7604	75	9	same	same	ADJ
fuelectenerg-7604	75	10	time	time	NOUN
fuelectenerg-7604	75	11	the	the	DET
fuelectenerg-7604	75	12	holes	hole	NOUN
fuelectenerg-7604	75	13	make	make	VERB
fuelectenerg-7604	75	14	the	the	DET
fuelectenerg-7604	75	15	release	release	NOUN
fuelectenerg-7604	75	16	of	of	ADP
fuelectenerg-7604	75	17	the	the	DET
fuelectenerg-7604	75	18	membrane	membrane	NOUN
fuelectenerg-7604	75	19	during	during	ADP
fuelectenerg-7604	75	20	the	the	DET
fuelectenerg-7604	75	21	fabrication	fabrication	NOUN
fuelectenerg-7604	75	22	process	process	NOUN
fuelectenerg-7604	75	23	easier	easy	ADJ
fuelectenerg-7604	75	24	.	.	PUNCT
fuelectenerg-7604	76	1	the	the	DET
fuelectenerg-7604	76	2	membrane	membrane	NOUN
fuelectenerg-7604	76	3	thickness	thickness	NOUN
fuelectenerg-7604	76	4	reduction	reduction	NOUN
fuelectenerg-7604	76	5	helps	help	VERB
fuelectenerg-7604	76	6	reduce	reduce	VERB
fuelectenerg-7604	76	7	the	the	DET
fuelectenerg-7604	76	8	required	require	VERB
fuelectenerg-7604	76	9	actuation	actuation	NOUN
fuelectenerg-7604	76	10	voltage	voltage	NOUN
fuelectenerg-7604	76	11	but	but	CCONJ
fuelectenerg-7604	76	12	up	up	ADP
fuelectenerg-7604	76	13	to	to	ADP
fuelectenerg-7604	76	14	some	some	DET
fuelectenerg-7604	76	15	level	level	NOUN
fuelectenerg-7604	76	16	the	the	DET
fuelectenerg-7604	76	17	damping	damp	VERB
fuelectenerg-7604	76	18	duration	duration	NOUN
fuelectenerg-7604	76	19	becomes	become	VERB
fuelectenerg-7604	76	20	limited	limited	ADJ
fuelectenerg-7604	76	21	.	.	PUNCT
fuelectenerg-7604	77	1	however	however	ADV
fuelectenerg-7604	77	2	,	,	PUNCT
fuelectenerg-7604	77	3	if	if	SCONJ
fuelectenerg-7604	77	4	the	the	DET
fuelectenerg-7604	77	5	membrane	membrane	NOUN
fuelectenerg-7604	77	6	thickness	thickness	NOUN
fuelectenerg-7604	77	7	is	be	AUX
fuelectenerg-7604	77	8	below	below	ADP
fuelectenerg-7604	77	9	0.7	0.7	NUM
fuelectenerg-7604	77	10	µm	µm	NOUN
fuelectenerg-7604	77	11	,	,	PUNCT
fuelectenerg-7604	77	12	the	the	DET
fuelectenerg-7604	77	13	membrane	membrane	NOUN
fuelectenerg-7604	77	14	damping	damp	VERB
fuelectenerg-7604	77	15	duration	duration	NOUN
fuelectenerg-7604	77	16	exceeds	exceed	VERB
fuelectenerg-7604	77	17	the	the	DET
fuelectenerg-7604	77	18	limits	limit	NOUN
fuelectenerg-7604	77	19	.	.	PUNCT
fuelectenerg-7604	78	1	in	in	ADP
fuelectenerg-7604	78	2	the	the	DET
fuelectenerg-7604	78	3	7th	7th	ADJ
fuelectenerg-7604	78	4	iteration	iteration	NOUN
fuelectenerg-7604	78	5	,	,	PUNCT
fuelectenerg-7604	78	6	we	we	PRON
fuelectenerg-7604	78	7	have	have	VERB
fuelectenerg-7604	78	8	notices	notice	NOUN
fuelectenerg-7604	78	9	that	that	PRON
fuelectenerg-7604	78	10	for	for	ADP
fuelectenerg-7604	78	11	a	a	DET
fuelectenerg-7604	78	12	0.6	0.6	NUM
fuelectenerg-7604	78	13	µm	µm	NOUN
fuelectenerg-7604	78	14	thickness	thickness	NOUN
fuelectenerg-7604	78	15	the	the	DET
fuelectenerg-7604	78	16	membrane	membrane	NOUN
fuelectenerg-7604	78	17	undergoes	undergoe	NOUN
fuelectenerg-7604	78	18	continuous	continuous	ADJ
fuelectenerg-7604	78	19	damping	damping	NOUN
fuelectenerg-7604	78	20	which	which	PRON
fuelectenerg-7604	78	21	will	will	AUX
fuelectenerg-7604	78	22	lead	lead	VERB
fuelectenerg-7604	78	23	to	to	ADP
fuelectenerg-7604	78	24	membrane	membrane	NOUN
fuelectenerg-7604	78	25	collapse	collapse	NOUN
fuelectenerg-7604	78	26	.	.	PUNCT
fuelectenerg-7604	79	1	so	so	ADV
fuelectenerg-7604	79	2	eventually	eventually	ADV
fuelectenerg-7604	79	3	,	,	PUNCT
fuelectenerg-7604	79	4	we	we	PRON
fuelectenerg-7604	79	5	have	have	AUX
fuelectenerg-7604	79	6	taken	take	VERB
fuelectenerg-7604	79	7	the	the	DET
fuelectenerg-7604	79	8	membrane	membrane	NOUN
fuelectenerg-7604	79	9	with	with	ADP
fuelectenerg-7604	79	10	0.7	0.7	NUM
fuelectenerg-7604	79	11	µm	µm	ADP
fuelectenerg-7604	79	12	thickness	thickness	NOUN
fuelectenerg-7604	79	13	which	which	PRON
fuelectenerg-7604	79	14	requires	require	VERB
fuelectenerg-7604	79	15	7.3	7.3	NUM
fuelectenerg-7604	79	16	v	v	NOUN
fuelectenerg-7604	79	17	for	for	ADP
fuelectenerg-7604	79	18	a	a	DET
fuelectenerg-7604	79	19	3	3	NUM
fuelectenerg-7604	79	20	µm	µm	ADP
fuelectenerg-7604	79	21	displacement	displacement	NOUN
fuelectenerg-7604	79	22	.	.	PUNCT
fuelectenerg-7604	80	1	the	the	DET
fuelectenerg-7604	80	2	designed	design	VERB
fuelectenerg-7604	80	3	membrane	membrane	NOUN
fuelectenerg-7604	80	4	is	be	AUX
fuelectenerg-7604	80	5	resonating	resonate	VERB
fuelectenerg-7604	80	6	at	at	ADP
fuelectenerg-7604	80	7	27	27	NUM
fuelectenerg-7604	80	8	khz	khz	NOUN
fuelectenerg-7604	80	9	in	in	ADP
fuelectenerg-7604	80	10	electrostatic	electrostatic	ADJ
fuelectenerg-7604	80	11	actuation	actuation	NOUN
fuelectenerg-7604	80	12	as	as	SCONJ
fuelectenerg-7604	80	13	shown	show	VERB
fuelectenerg-7604	80	14	in	in	ADP
fuelectenerg-7604	80	15	fig	fig	NOUN
fuelectenerg-7604	80	16	.	.	PUNCT
fuelectenerg-7604	81	1	6	6	NUM
fuelectenerg-7604	81	2	.	.	X
fuelectenerg-7604	81	3	fig	fig	NOUN
fuelectenerg-7604	81	4	.	.	PUNCT
fuelectenerg-7604	82	1	6	6	NUM
fuelectenerg-7604	82	2	resonant	resonant	ADJ
fuelectenerg-7604	82	3	frequency	frequency	NOUN
fuelectenerg-7604	82	4	the	the	DET
fuelectenerg-7604	82	5	real	real	ADJ
fuelectenerg-7604	82	6	advantage	advantage	NOUN
fuelectenerg-7604	82	7	introduced	introduce	VERB
fuelectenerg-7604	82	8	by	by	ADP
fuelectenerg-7604	82	9	perforating	perforate	VERB
fuelectenerg-7604	82	10	the	the	DET
fuelectenerg-7604	82	11	membrane	membrane	NOUN
fuelectenerg-7604	82	12	is	be	AUX
fuelectenerg-7604	82	13	to	to	PART
fuelectenerg-7604	82	14	ensure	ensure	VERB
fuelectenerg-7604	82	15	an	an	DET
fuelectenerg-7604	82	16	improved	improved	ADJ
fuelectenerg-7604	82	17	stress	stress	NOUN
fuelectenerg-7604	82	18	distribution	distribution	NOUN
fuelectenerg-7604	82	19	.	.	PUNCT
fuelectenerg-7604	83	1	consequently	consequently	ADV
fuelectenerg-7604	83	2	,	,	PUNCT
fuelectenerg-7604	83	3	the	the	DET
fuelectenerg-7604	83	4	reliability	reliability	NOUN
fuelectenerg-7604	83	5	of	of	ADP
fuelectenerg-7604	83	6	the	the	DET
fuelectenerg-7604	83	7	switch	switch	NOUN
fuelectenerg-7604	83	8	will	will	AUX
fuelectenerg-7604	83	9	improve	improve	VERB
fuelectenerg-7604	83	10	.	.	PUNCT
fuelectenerg-7604	84	1	the	the	DET
fuelectenerg-7604	84	2	stress	stress	NOUN
fuelectenerg-7604	84	3	distribution	distribution	NOUN
fuelectenerg-7604	84	4	in	in	ADP
fuelectenerg-7604	84	5	the	the	DET
fuelectenerg-7604	84	6	cantilever	cantilever	NOUN
fuelectenerg-7604	84	7	membrane	membrane	NOUN
fuelectenerg-7604	84	8	is	be	AUX
fuelectenerg-7604	84	9	shown	show	VERB
fuelectenerg-7604	84	10	in	in	ADP
fuelectenerg-7604	84	11	fig	fig	NOUN
fuelectenerg-7604	84	12	.	.	PUNCT
fuelectenerg-7604	85	1	7	7	X
fuelectenerg-7604	85	2	.	.	X
fuelectenerg-7604	85	3	fig	fig	NOUN
fuelectenerg-7604	85	4	.	.	PUNCT
fuelectenerg-7604	86	1	7	7	NUM
fuelectenerg-7604	86	2	stress	stress	NOUN
fuelectenerg-7604	86	3	distribution	distribution	NOUN
fuelectenerg-7604	86	4	in	in	ADP
fuelectenerg-7604	86	5	the	the	DET
fuelectenerg-7604	86	6	designed	design	VERB
fuelectenerg-7604	86	7	cantilever	cantilever	NOUN
fuelectenerg-7604	86	8	membrane	membrane	NOUN
fuelectenerg-7604	86	9	damping	damp	VERB
fuelectenerg-7604	86	10	analysis	analysis	NOUN
fuelectenerg-7604	86	11	to	to	PART
fuelectenerg-7604	86	12	improve	improve	VERB
fuelectenerg-7604	86	13	the	the	DET
fuelectenerg-7604	86	14	performance	performance	NOUN
fuelectenerg-7604	86	15	of	of	ADP
fuelectenerg-7604	86	16	shunt	shunt	NOUN
fuelectenerg-7604	86	17	capacitive	capacitive	ADJ
fuelectenerg-7604	86	18	rf	rf	NOUN
fuelectenerg-7604	86	19	mems	mem	NOUN
fuelectenerg-7604	86	20	switch	switch	VERB
fuelectenerg-7604	86	21	389	389	NUM
fuelectenerg-7604	86	22	5	5	NUM
fuelectenerg-7604	86	23	.	.	PUNCT
fuelectenerg-7604	87	1	rf	rf	NOUN
fuelectenerg-7604	87	2	mems	mems	PROPN
fuelectenerg-7604	87	3	switch	switch	VERB
fuelectenerg-7604	87	4	the	the	DET
fuelectenerg-7604	87	5	rf	rf	NOUN
fuelectenerg-7604	87	6	mems	mem	NOUN
fuelectenerg-7604	87	7	switch	switch	NOUN
fuelectenerg-7604	87	8	is	be	AUX
fuelectenerg-7604	87	9	designed	design	VERB
fuelectenerg-7604	87	10	using	use	VERB
fuelectenerg-7604	87	11	performance	performance	NOUN
fuelectenerg-7604	87	12	improved	improve	VERB
fuelectenerg-7604	87	13	rectangular	rectangular	ADJ
fuelectenerg-7604	87	14	membrane	membrane	NOUN
fuelectenerg-7604	87	15	with	with	ADP
fuelectenerg-7604	87	16	slots	slot	NOUN
fuelectenerg-7604	87	17	and	and	CCONJ
fuelectenerg-7604	87	18	perforation	perforation	NOUN
fuelectenerg-7604	87	19	.	.	PUNCT
fuelectenerg-7604	88	1	the	the	DET
fuelectenerg-7604	88	2	cpw	cpw	NOUN
fuelectenerg-7604	88	3	transmission	transmission	NOUN
fuelectenerg-7604	88	4	line	line	NOUN
fuelectenerg-7604	88	5	with	with	ADP
fuelectenerg-7604	88	6	silicon	silicon	NOUN
fuelectenerg-7604	88	7	used	use	VERB
fuelectenerg-7604	88	8	as	as	ADP
fuelectenerg-7604	88	9	a	a	DET
fuelectenerg-7604	88	10	substrate	substrate	NOUN
fuelectenerg-7604	88	11	is	be	AUX
fuelectenerg-7604	88	12	shown	show	VERB
fuelectenerg-7604	88	13	in	in	ADP
fuelectenerg-7604	88	14	fig	fig	NOUN
fuelectenerg-7604	88	15	.	.	PUNCT
fuelectenerg-7604	89	1	8	8	NUM
fuelectenerg-7604	89	2	.	.	PUNCT
fuelectenerg-7604	90	1	the	the	DET
fuelectenerg-7604	90	2	height	height	NOUN
fuelectenerg-7604	90	3	of	of	ADP
fuelectenerg-7604	90	4	the	the	DET
fuelectenerg-7604	90	5	silicon	silicon	NOUN
fuelectenerg-7604	90	6	substrate	substrate	NOUN
fuelectenerg-7604	90	7	is	be	AUX
fuelectenerg-7604	90	8	800	800	NUM
fuelectenerg-7604	90	9	µm	µm	NUM
fuelectenerg-7604	90	10	.	.	PUNCT
fuelectenerg-7604	90	11	fig	fig	NOUN
fuelectenerg-7604	90	12	.	.	PUNCT
fuelectenerg-7604	91	1	8	8	NUM
fuelectenerg-7604	91	2	shunt	shunt	NOUN
fuelectenerg-7604	91	3	capacitive	capacitive	ADJ
fuelectenerg-7604	91	4	rf	rf	NOUN
fuelectenerg-7604	91	5	mems	mem	NOUN
fuelectenerg-7604	91	6	switch	switch	NOUN
fuelectenerg-7604	91	7	with	with	ADP
fuelectenerg-7604	91	8	cantilever	cantilever	NOUN
fuelectenerg-7604	91	9	membrane	membrane	NOUN
fuelectenerg-7604	91	10	a	a	DET
fuelectenerg-7604	91	11	dielectric	dielectric	ADJ
fuelectenerg-7604	91	12	thin	thin	ADJ
fuelectenerg-7604	91	13	film	film	NOUN
fuelectenerg-7604	91	14	of	of	ADP
fuelectenerg-7604	91	15	1	1	NUM
fuelectenerg-7604	91	16	µm	µm	NOUN
fuelectenerg-7604	91	17	thickness	thickness	NOUN
fuelectenerg-7604	91	18	is	be	AUX
fuelectenerg-7604	91	19	placed	place	VERB
fuelectenerg-7604	91	20	on	on	ADP
fuelectenerg-7604	91	21	the	the	DET
fuelectenerg-7604	91	22	top	top	NOUN
fuelectenerg-7604	91	23	of	of	ADP
fuelectenerg-7604	91	24	the	the	DET
fuelectenerg-7604	91	25	silicon	silicon	NOUN
fuelectenerg-7604	91	26	substrate	substrate	NOUN
fuelectenerg-7604	91	27	for	for	ADP
fuelectenerg-7604	91	28	better	well	ADJ
fuelectenerg-7604	91	29	insulation	insulation	NOUN
fuelectenerg-7604	91	30	.	.	PUNCT
fuelectenerg-7604	92	1	a	a	DET
fuelectenerg-7604	92	2	cpw	cpw	NOUN
fuelectenerg-7604	92	3	transmission	transmission	NOUN
fuelectenerg-7604	92	4	line	line	NOUN
fuelectenerg-7604	92	5	with	with	ADP
fuelectenerg-7604	92	6	g	g	NOUN
fuelectenerg-7604	92	7	-	-	PUNCT
fuelectenerg-7604	92	8	s	s	NOUN
fuelectenerg-7604	92	9	-	-	PUNCT
fuelectenerg-7604	92	10	g	g	NOUN
fuelectenerg-7604	92	11	of	of	ADP
fuelectenerg-7604	92	12	85	85	NUM
fuelectenerg-7604	92	13	µm	µm	PART
fuelectenerg-7604	92	14	70	70	NUM
fuelectenerg-7604	92	15	µm	µm	ADP
fuelectenerg-7604	92	16	85	85	NUM
fuelectenerg-7604	92	17	µm	µm	NOUN
fuelectenerg-7604	92	18	is	be	AUX
fuelectenerg-7604	92	19	micromachined	micromachine	VERB
fuelectenerg-7604	92	20	in	in	ADP
fuelectenerg-7604	92	21	gold	gold	NOUN
fuelectenerg-7604	92	22	(	(	PUNCT
fuelectenerg-7604	92	23	au	au	PROPN
fuelectenerg-7604	92	24	)	)	PUNCT
fuelectenerg-7604	92	25	.	.	PUNCT
fuelectenerg-7604	93	1	unlike	unlike	ADP
fuelectenerg-7604	93	2	the	the	DET
fuelectenerg-7604	93	3	traditional	traditional	ADJ
fuelectenerg-7604	93	4	rf	rf	ADJ
fuelectenerg-7604	93	5	mems	mem	NOUN
fuelectenerg-7604	93	6	switches	switch	NOUN
fuelectenerg-7604	93	7	,	,	PUNCT
fuelectenerg-7604	93	8	in	in	ADP
fuelectenerg-7604	93	9	this	this	DET
fuelectenerg-7604	93	10	work	work	NOUN
fuelectenerg-7604	93	11	we	we	PRON
fuelectenerg-7604	93	12	have	have	AUX
fuelectenerg-7604	93	13	incorporated	incorporate	VERB
fuelectenerg-7604	93	14	a	a	DET
fuelectenerg-7604	93	15	separate	separate	ADJ
fuelectenerg-7604	93	16	actuation	actuation	NOUN
fuelectenerg-7604	93	17	electrode	electrode	NOUN
fuelectenerg-7604	93	18	of	of	ADP
fuelectenerg-7604	93	19	120	120	NUM
fuelectenerg-7604	93	20	µm	µm	ADP
fuelectenerg-7604	93	21	-200	-200	NUM
fuelectenerg-7604	93	22	µm	µm	ADP
fuelectenerg-7604	93	23	0.6	0.6	NUM
fuelectenerg-7604	93	24	µm	µm	NOUN
fuelectenerg-7604	93	25	to	to	PART
fuelectenerg-7604	93	26	be	be	AUX
fuelectenerg-7604	93	27	used	use	VERB
fuelectenerg-7604	93	28	for	for	ADP
fuelectenerg-7604	93	29	cantilever	cantilever	NOUN
fuelectenerg-7604	93	30	electrostatic	electrostatic	ADJ
fuelectenerg-7604	93	31	actuation	actuation	NOUN
fuelectenerg-7604	93	32	,	,	PUNCT
fuelectenerg-7604	93	33	which	which	PRON
fuelectenerg-7604	93	34	helps	help	VERB
fuelectenerg-7604	93	35	reduce	reduce	VERB
fuelectenerg-7604	93	36	the	the	DET
fuelectenerg-7604	93	37	noise	noise	NOUN
fuelectenerg-7604	93	38	in	in	ADP
fuelectenerg-7604	93	39	the	the	DET
fuelectenerg-7604	93	40	rf	rf	ADJ
fuelectenerg-7604	93	41	cpw	cpw	NOUN
fuelectenerg-7604	93	42	line	line	NOUN
fuelectenerg-7604	93	43	.	.	PUNCT
fuelectenerg-7604	94	1	hfo2	hfo2	NOUN
fuelectenerg-7604	94	2	of	of	ADP
fuelectenerg-7604	94	3	220	220	NUM
fuelectenerg-7604	94	4	µm	µm	NOUN
fuelectenerg-7604	94	5	length	length	NOUN
fuelectenerg-7604	94	6	and	and	CCONJ
fuelectenerg-7604	94	7	70	70	NUM
fuelectenerg-7604	94	8	µm	µm	NOUN
fuelectenerg-7604	94	9	width	width	NOUN
fuelectenerg-7604	94	10	is	be	AUX
fuelectenerg-7604	94	11	used	use	VERB
fuelectenerg-7604	94	12	as	as	ADP
fuelectenerg-7604	94	13	a	a	DET
fuelectenerg-7604	94	14	dielectric	dielectric	ADJ
fuelectenerg-7604	94	15	material	material	NOUN
fuelectenerg-7604	94	16	.	.	PUNCT
fuelectenerg-7604	95	1	its	its	PRON
fuelectenerg-7604	95	2	relative	relative	ADJ
fuelectenerg-7604	95	3	dielectric	dielectric	ADJ
fuelectenerg-7604	95	4	permittivity	permittivity	NOUN
fuelectenerg-7604	95	5	(	(	PUNCT
fuelectenerg-7604	95	6	εr	εr	NOUN
fuelectenerg-7604	95	7	)	)	PUNCT
fuelectenerg-7604	95	8	is	be	AUX
fuelectenerg-7604	95	9	23	23	NUM
fuelectenerg-7604	95	10	.	.	PUNCT
fuelectenerg-7604	96	1	the	the	DET
fuelectenerg-7604	96	2	complete	complete	ADJ
fuelectenerg-7604	96	3	switch	switch	NOUN
fuelectenerg-7604	96	4	dimensions	dimension	NOUN
fuelectenerg-7604	96	5	are	be	AUX
fuelectenerg-7604	96	6	presented	present	VERB
fuelectenerg-7604	96	7	in	in	ADP
fuelectenerg-7604	96	8	table	table	NOUN
fuelectenerg-7604	96	9	2	2	NUM
fuelectenerg-7604	96	10	.	.	PUNCT
fuelectenerg-7604	97	1	the	the	DET
fuelectenerg-7604	97	2	electrostatic	electrostatic	ADJ
fuelectenerg-7604	97	3	actuation	actuation	NOUN
fuelectenerg-7604	97	4	with	with	ADP
fuelectenerg-7604	97	5	7.3	7.3	NUM
fuelectenerg-7604	97	6	v	v	NOUN
fuelectenerg-7604	97	7	creates	create	VERB
fuelectenerg-7604	97	8	an	an	DET
fuelectenerg-7604	97	9	electrostatic	electrostatic	ADJ
fuelectenerg-7604	97	10	force	force	NOUN
fuelectenerg-7604	97	11	of	of	ADP
fuelectenerg-7604	97	12	7.5	7.5	NUM
fuelectenerg-7604	97	13	x	x	SYM
fuelectenerg-7604	97	14	10	10	NUM
fuelectenerg-7604	97	15	-	-	SYM
fuelectenerg-7604	97	16	7	7	NUM
fuelectenerg-7604	97	17	n.	n.	NOUN
fuelectenerg-7604	97	18	the	the	DET
fuelectenerg-7604	97	19	membrane	membrane	NOUN
fuelectenerg-7604	97	20	spring	spring	NOUN
fuelectenerg-7604	97	21	constant	constant	ADJ
fuelectenerg-7604	97	22	is	be	AUX
fuelectenerg-7604	97	23	0.25	0.25	NUM
fuelectenerg-7604	97	24	n	n	CCONJ
fuelectenerg-7604	97	25	/	/	SYM
fuelectenerg-7604	97	26	m.	m.	NOUN
fuelectenerg-7604	97	27	the	the	DET
fuelectenerg-7604	97	28	capacitance	capacitance	NOUN
fuelectenerg-7604	97	29	analysis	analysis	NOUN
fuelectenerg-7604	97	30	results	result	NOUN
fuelectenerg-7604	97	31	with	with	ADP
fuelectenerg-7604	97	32	high	high	ADJ
fuelectenerg-7604	97	33	relative	relative	ADJ
fuelectenerg-7604	97	34	permitivity	permitivity	NOUN
fuelectenerg-7604	97	35	thin	thin	ADJ
fuelectenerg-7604	97	36	films	film	NOUN
fuelectenerg-7604	97	37	are	be	AUX
fuelectenerg-7604	97	38	listed	list	VERB
fuelectenerg-7604	97	39	in	in	ADP
fuelectenerg-7604	97	40	table	table	NOUN
fuelectenerg-7604	97	41	3	3	NUM
fuelectenerg-7604	97	42	.	.	PUNCT
fuelectenerg-7604	98	1	the	the	DET
fuelectenerg-7604	98	2	designed	design	VERB
fuelectenerg-7604	98	3	rf	rf	NOUN
fuelectenerg-7604	98	4	mems	mem	NOUN
fuelectenerg-7604	98	5	switch	switch	NOUN
fuelectenerg-7604	98	6	shows	show	VERB
fuelectenerg-7604	98	7	an	an	DET
fuelectenerg-7604	98	8	isolation	isolation	NOUN
fuelectenerg-7604	98	9	of	of	ADP
fuelectenerg-7604	98	10	-63.2	-63.2	NOUN
fuelectenerg-7604	98	11	db	db	NOUN
fuelectenerg-7604	98	12	and	and	CCONJ
fuelectenerg-7604	98	13	an	an	DET
fuelectenerg-7604	98	14	insertion	insertion	NOUN
fuelectenerg-7604	98	15	of	of	ADP
fuelectenerg-7604	98	16	-0.12	-0.12	NUM
fuelectenerg-7604	98	17	db	db	PROPN
fuelectenerg-7604	98	18	as	as	SCONJ
fuelectenerg-7604	98	19	shown	show	VERB
fuelectenerg-7604	98	20	in	in	ADP
fuelectenerg-7604	98	21	fig	fig	NOUN
fuelectenerg-7604	98	22	.	.	PUNCT
fuelectenerg-7604	99	1	9	9	NUM
fuelectenerg-7604	99	2	and	and	CCONJ
fuelectenerg-7604	99	3	fig	fig	NOUN
fuelectenerg-7604	99	4	.	.	PUNCT
fuelectenerg-7604	100	1	10	10	NUM
fuelectenerg-7604	100	2	,	,	PUNCT
fuelectenerg-7604	100	3	respectively	respectively	ADV
fuelectenerg-7604	100	4	.	.	PUNCT
fuelectenerg-7604	101	1	our	our	PRON
fuelectenerg-7604	101	2	presented	present	VERB
fuelectenerg-7604	101	3	work	work	NOUN
fuelectenerg-7604	101	4	is	be	AUX
fuelectenerg-7604	101	5	compared	compare	VERB
fuelectenerg-7604	101	6	to	to	ADP
fuelectenerg-7604	101	7	the	the	DET
fuelectenerg-7604	101	8	state	state	NOUN
fuelectenerg-7604	101	9	of	of	ADP
fuelectenerg-7604	101	10	art	art	NOUN
fuelectenerg-7604	101	11	as	as	SCONJ
fuelectenerg-7604	101	12	presented	present	VERB
fuelectenerg-7604	101	13	in	in	ADP
fuelectenerg-7604	101	14	table	table	NOUN
fuelectenerg-7604	101	15	4	4	NUM
fuelectenerg-7604	101	16	.	.	X
fuelectenerg-7604	101	17	390	390	NUM
fuelectenerg-7604	101	18	l.	l.	PROPN
fuelectenerg-7604	101	19	n.	n.	PROPN
fuelectenerg-7604	101	20	thalluri	thalluri	PROPN
fuelectenerg-7604	101	21	,	,	PUNCT
fuelectenerg-7604	101	22	k	k	PROPN
fuelectenerg-7604	101	23	v	v	PROPN
fuelectenerg-7604	101	24	v	v	X
fuelectenerg-7604	101	25	kumar	kumar	PROPN
fuelectenerg-7604	101	26	,	,	PUNCT
fuelectenerg-7604	101	27	k.	k.	PROPN
fuelectenerg-7604	101	28	r.	r.	PROPN
fuelectenerg-7604	101	29	sekhar	sekhar	PROPN
fuelectenerg-7604	101	30	,	,	PUNCT
fuelectenerg-7604	101	31	n	n	PROPN
fuelectenerg-7604	101	32	b	b	PROPN
fuelectenerg-7604	101	33	babu	babu	PROPN
fuelectenerg-7604	101	34	d.3	d.3	PROPN
fuelectenerg-7604	101	35	,	,	PUNCT
fuelectenerg-7604	101	36	s	s	PART
fuelectenerg-7604	101	37	s	s	X
fuelectenerg-7604	101	38	kiran	kiran	NOUN
fuelectenerg-7604	101	39	,	,	PUNCT
fuelectenerg-7604	101	40	k.	k.	PROPN
fuelectenerg-7604	101	41	guha	guha	PROPN
fuelectenerg-7604	101	42	fig	fig	PROPN
fuelectenerg-7604	101	43	.	.	PUNCT
fuelectenerg-7604	102	1	9	9	NUM
fuelectenerg-7604	102	2	isolation	isolation	NOUN
fuelectenerg-7604	102	3	losses	loss	NOUN
fuelectenerg-7604	102	4	fig	fig	NOUN
fuelectenerg-7604	102	5	.	.	PUNCT
fuelectenerg-7604	103	1	10	10	NUM
fuelectenerg-7604	103	2	insertion	insertion	NOUN
fuelectenerg-7604	103	3	losses	loss	NOUN
fuelectenerg-7604	103	4	table	table	NOUN
fuelectenerg-7604	103	5	2	2	NUM
fuelectenerg-7604	103	6	shunt	shunt	NOUN
fuelectenerg-7604	103	7	capacitive	capacitive	ADJ
fuelectenerg-7604	103	8	rf	rf	NOUN
fuelectenerg-7604	103	9	mems	mem	NOUN
fuelectenerg-7604	103	10	switch	switch	NOUN
fuelectenerg-7604	103	11	dimensions	dimension	NOUN
fuelectenerg-7604	103	12	parameter	parameter	NOUN
fuelectenerg-7604	103	13	description	description	NOUN
fuelectenerg-7604	103	14	value(µm	value(µm	NOUN
fuelectenerg-7604	103	15	)	)	PUNCT
fuelectenerg-7604	103	16	parameter	parameter	NOUN
fuelectenerg-7604	103	17	description	description	NOUN
fuelectenerg-7604	103	18	value(µm	value(µm	NOUN
fuelectenerg-7604	103	19	)	)	PUNCT
fuelectenerg-7604	103	20	sl	sl	NOUN
fuelectenerg-7604	103	21	substrate	substrate	NOUN
fuelectenerg-7604	103	22	dimensions	dimension	NOUN
fuelectenerg-7604	103	23	800	800	NUM
fuelectenerg-7604	103	24	dl	dl	NOUN
fuelectenerg-7604	103	25	dielectric	dielectric	PROPN
fuelectenerg-7604	103	26	220	220	NUM
fuelectenerg-7604	103	27	sw	sw	PROPN
fuelectenerg-7604	103	28	500	500	NUM
fuelectenerg-7604	103	29	dw	dw	PROPN
fuelectenerg-7604	103	30	70	70	NUM
fuelectenerg-7604	103	31	st	st	PROPN
fuelectenerg-7604	103	32	800	800	NUM
fuelectenerg-7604	103	33	bpl	bpl	NOUN
fuelectenerg-7604	103	34	bias	bias	NOUN
fuelectenerg-7604	103	35	line	line	NOUN
fuelectenerg-7604	103	36	50	50	NUM
fuelectenerg-7604	103	37	g	g	NOUN
fuelectenerg-7604	103	38	-	-	PUNCT
fuelectenerg-7604	103	39	s	s	NOUN
fuelectenerg-7604	103	40	-	-	PUNCT
fuelectenerg-7604	103	41	g	g	NOUN
fuelectenerg-7604	103	42	cpw	cpw	NOUN
fuelectenerg-7604	103	43	line	line	NOUN
fuelectenerg-7604	103	44	&	&	CCONJ
fuelectenerg-7604	103	45	slots	slot	NOUN
fuelectenerg-7604	103	46	85	85	NUM
fuelectenerg-7604	103	47	-	-	SYM
fuelectenerg-7604	103	48	70	70	NUM
fuelectenerg-7604	103	49	-	-	SYM
fuelectenerg-7604	103	50	85	85	NUM
fuelectenerg-7604	103	51	bpw	bpw	NOUN
fuelectenerg-7604	103	52	50	50	NUM
fuelectenerg-7604	103	53	d	d	NOUN
fuelectenerg-7604	103	54	120	120	NUM
fuelectenerg-7604	103	55	g	g	PROPN
fuelectenerg-7604	103	56	10	10	NUM
fuelectenerg-7604	103	57	e	e	SYM
fuelectenerg-7604	103	58	40	40	NUM
fuelectenerg-7604	103	59	h	h	NOUN
fuelectenerg-7604	103	60	185	185	NUM
fuelectenerg-7604	103	61	f	f	NOUN
fuelectenerg-7604	103	62	300	300	NUM
fuelectenerg-7604	103	63	i	i	NOUN
fuelectenerg-7604	103	64	50	50	NUM
fuelectenerg-7604	103	65	table	table	NOUN
fuelectenerg-7604	103	66	3	3	NUM
fuelectenerg-7604	103	67	capacitance	capacitance	NOUN
fuelectenerg-7604	103	68	ratio	ratio	NOUN
fuelectenerg-7604	103	69	material	material	NOUN
fuelectenerg-7604	103	70	dielectric	dielectric	ADJ
fuelectenerg-7604	103	71	constant	constant	ADJ
fuelectenerg-7604	103	72	(	(	PUNCT
fuelectenerg-7604	103	73	εr	εr	NOUN
fuelectenerg-7604	103	74	)	)	PUNCT
fuelectenerg-7604	103	75	dielectric	dielectric	ADJ
fuelectenerg-7604	103	76	thickness	thickness	NOUN
fuelectenerg-7604	103	77	(	(	PUNCT
fuelectenerg-7604	103	78	dt	dt	NOUN
fuelectenerg-7604	103	79	)	)	PUNCT
fuelectenerg-7604	103	80	upstate	upstate	ADJ
fuelectenerg-7604	103	81	capacitance	capacitance	NOUN
fuelectenerg-7604	103	82	(	(	PUNCT
fuelectenerg-7604	103	83	cup	cup	NOUN
fuelectenerg-7604	103	84	)	)	PUNCT
fuelectenerg-7604	103	85	downstate	downstate	NOUN
fuelectenerg-7604	103	86	capacitance	capacitance	NOUN
fuelectenerg-7604	103	87	(	(	PUNCT
fuelectenerg-7604	103	88	cdown	cdown	NOUN
fuelectenerg-7604	103	89	)	)	PUNCT
fuelectenerg-7604	103	90	capacitance	capacitance	NOUN
fuelectenerg-7604	103	91	ratio	ratio	NOUN
fuelectenerg-7604	103	92	=	=	PUNCT
fuelectenerg-7604	103	93	cdown	cdown	PROPN
fuelectenerg-7604	103	94	/	/	PUNCT
fuelectenerg-7604	103	95	cup	cup	PROPN
fuelectenerg-7604	103	96	aln	aln	PROPN
fuelectenerg-7604	103	97	9.8	9.8	NUM
fuelectenerg-7604	103	98	0.1	0.1	NUM
fuelectenerg-7604	103	99	µm	µm	ADP
fuelectenerg-7604	103	100	73.9	73.9	NUM
fuelectenerg-7604	103	101	ff	ff	NOUN
fuelectenerg-7604	103	102	11	11	NUM
fuelectenerg-7604	103	103	pf	pf	PROPN
fuelectenerg-7604	103	104	148.8	148.8	NUM
fuelectenerg-7604	103	105	gaas	gaas	NOUN
fuelectenerg-7604	103	106	12	12	NUM
fuelectenerg-7604	103	107	0.1	0.1	NUM
fuelectenerg-7604	103	108	µm	µm	ADP
fuelectenerg-7604	103	109	75.6	75.6	NUM
fuelectenerg-7604	103	110	ff	ff	PROPN
fuelectenerg-7604	103	111	13.5	13.5	NUM
fuelectenerg-7604	103	112	pf	pf	PROPN
fuelectenerg-7604	103	113	178.5	178.5	NUM
fuelectenerg-7604	103	114	hfo2	hfo2	NOUN
fuelectenerg-7604	103	115	23	23	NUM
fuelectenerg-7604	103	116	0.1	0.1	NUM
fuelectenerg-7604	103	117	µm	µm	ADP
fuelectenerg-7604	103	118	77.3	77.3	NUM
fuelectenerg-7604	103	119	ff	ff	NOUN
fuelectenerg-7604	103	120	26	26	NUM
fuelectenerg-7604	103	121	pf	pf	PROPN
fuelectenerg-7604	103	122	336.3	336.3	NUM
fuelectenerg-7604	103	123	damping	damp	VERB
fuelectenerg-7604	103	124	analysis	analysis	NOUN
fuelectenerg-7604	103	125	to	to	PART
fuelectenerg-7604	103	126	improve	improve	VERB
fuelectenerg-7604	103	127	the	the	DET
fuelectenerg-7604	103	128	performance	performance	NOUN
fuelectenerg-7604	103	129	of	of	ADP
fuelectenerg-7604	103	130	shunt	shunt	NOUN
fuelectenerg-7604	103	131	capacitive	capacitive	ADJ
fuelectenerg-7604	103	132	rf	rf	NOUN
fuelectenerg-7604	103	133	mems	mem	NOUN
fuelectenerg-7604	103	134	switch	switch	VERB
fuelectenerg-7604	103	135	391	391	NUM
fuelectenerg-7604	103	136	table	table	NOUN
fuelectenerg-7604	103	137	4	4	NUM
fuelectenerg-7604	103	138	our	our	PRON
fuelectenerg-7604	103	139	work	work	NOUN
fuelectenerg-7604	103	140	comparison	comparison	NOUN
fuelectenerg-7604	103	141	with	with	ADP
fuelectenerg-7604	103	142	state	state	NOUN
fuelectenerg-7604	103	143	-	-	PUNCT
fuelectenerg-7604	103	144	of	of	ADP
fuelectenerg-7604	103	145	-	-	PUNCT
fuelectenerg-7604	103	146	art	art	NOUN
fuelectenerg-7604	103	147	parameter	parameter	NOUN
fuelectenerg-7604	103	148	[	[	X
fuelectenerg-7604	103	149	17	17	NUM
fuelectenerg-7604	103	150	]	]	X
fuelectenerg-7604	104	1	[	[	X
fuelectenerg-7604	104	2	18	18	NUM
fuelectenerg-7604	104	3	]	]	PUNCT
fuelectenerg-7604	104	4	our	our	PRON
fuelectenerg-7604	104	5	work	work	NOUN
fuelectenerg-7604	104	6	substrate	substrate	NOUN
fuelectenerg-7604	104	7	glass	glass	NOUN
fuelectenerg-7604	104	8	silicon	silicon	NOUN
fuelectenerg-7604	104	9	silicon	silicon	NOUN
fuelectenerg-7604	104	10	insulator	insulator	NOUN
fuelectenerg-7604	104	11	-sio2	-sio2	PROPN
fuelectenerg-7604	104	12	sio2	sio2	PROPN
fuelectenerg-7604	104	13	micro	micro	PROPN
fuelectenerg-7604	104	14	mechanical	mechanical	ADJ
fuelectenerg-7604	104	15	structure	structure	NOUN
fuelectenerg-7604	104	16	cantilever	cantilever	NOUN
fuelectenerg-7604	104	17	cantilever	cantilever	NOUN
fuelectenerg-7604	104	18	cantilever	cantilever	NOUN
fuelectenerg-7604	104	19	damping	damp	VERB
fuelectenerg-7604	104	20	analysis	analysis	NOUN
fuelectenerg-7604	104	21	is	be	AUX
fuelectenerg-7604	104	22	performed	perform	VERB
fuelectenerg-7604	104	23	no	no	INTJ
fuelectenerg-7604	104	24	no	no	DET
fuelectenerg-7604	104	25	yes	yes	INTJ
fuelectenerg-7604	104	26	air	air	NOUN
fuelectenerg-7604	104	27	gap	gap	NOUN
fuelectenerg-7604	104	28	(	(	PUNCT
fuelectenerg-7604	104	29	µm	µm	NOUN
fuelectenerg-7604	104	30	)	)	PUNCT
fuelectenerg-7604	104	31	3	3	NUM
fuelectenerg-7604	104	32	3	3	NUM
fuelectenerg-7604	104	33	3	3	NUM
fuelectenerg-7604	104	34	actuation	actuation	NOUN
fuelectenerg-7604	104	35	voltage	voltage	NOUN
fuelectenerg-7604	104	36	(	(	PUNCT
fuelectenerg-7604	104	37	v	v	NOUN
fuelectenerg-7604	104	38	)	)	PUNCT
fuelectenerg-7604	104	39	16	16	NUM
fuelectenerg-7604	104	40	19	19	NUM
fuelectenerg-7604	104	41	7.3	7.3	NUM
fuelectenerg-7604	104	42	total	total	NOUN
fuelectenerg-7604	104	43	reaction	reaction	NOUN
fuelectenerg-7604	104	44	electrostatic	electrostatic	ADJ
fuelectenerg-7604	104	45	force	force	NOUN
fuelectenerg-7604	104	46	(	(	PUNCT
fuelectenerg-7604	104	47	n	n	CCONJ
fuelectenerg-7604	104	48	)	)	PUNCT
fuelectenerg-7604	105	1	----7.5	----7.5	PROPN
fuelectenerg-7604	105	2	*	*	PUNCT
fuelectenerg-7604	105	3	10	10	NUM
fuelectenerg-7604	105	4	-	-	SYM
fuelectenerg-7604	105	5	7	7	NUM
fuelectenerg-7604	105	6	displacement	displacement	NOUN
fuelectenerg-7604	105	7	(	(	PUNCT
fuelectenerg-7604	105	8	µm	µm	NOUN
fuelectenerg-7604	105	9	)	)	PUNCT
fuelectenerg-7604	105	10	3	3	NUM
fuelectenerg-7604	105	11	3	3	NUM
fuelectenerg-7604	105	12	3	3	NUM
fuelectenerg-7604	105	13	spring	spring	NOUN
fuelectenerg-7604	105	14	constant	constant	ADJ
fuelectenerg-7604	105	15	(	(	PUNCT
fuelectenerg-7604	105	16	n	n	CCONJ
fuelectenerg-7604	105	17	/	/	SYM
fuelectenerg-7604	105	18	m	m	NOUN
fuelectenerg-7604	105	19	)	)	PUNCT
fuelectenerg-7604	105	20	----0.25	----0.25	PROPN
fuelectenerg-7604	105	21	upstate	upstate	PROPN
fuelectenerg-7604	105	22	&	&	CCONJ
fuelectenerg-7604	105	23	downstate	downstate	PROPN
fuelectenerg-7604	105	24	capacitances	capacitance	NOUN
fuelectenerg-7604	105	25	-	-	PUNCT
fuelectenerg-7604	105	26	&	&	CCONJ
fuelectenerg-7604	105	27	2.75	2.75	NUM
fuelectenerg-7604	105	28	pf	pf	PROPN
fuelectenerg-7604	105	29	-&0.02	-&0.02	PROPN
fuelectenerg-7604	105	30	pf	pf	PROPN
fuelectenerg-7604	105	31	77.3	77.3	NUM
fuelectenerg-7604	105	32	ff	ff	NOUN
fuelectenerg-7604	105	33	&	&	CCONJ
fuelectenerg-7604	105	34	26	26	NUM
fuelectenerg-7604	105	35	pf	pf	NOUN
fuelectenerg-7604	105	36	insertion	insertion	NOUN
fuelectenerg-7604	105	37	loss	loss	NOUN
fuelectenerg-7604	105	38	(	(	PUNCT
fuelectenerg-7604	105	39	db	db	NOUN
fuelectenerg-7604	105	40	)	)	PUNCT
fuelectenerg-7604	106	1	-0.41	-0.41	CCONJ
fuelectenerg-7604	106	2	0.05	0.05	NUM
fuelectenerg-7604	106	3	-0.01	-0.01	NUM
fuelectenerg-7604	106	4	to	to	ADP
fuelectenerg-7604	106	5	-0.12	-0.12	NUM
fuelectenerg-7604	106	6	isolation	isolation	NOUN
fuelectenerg-7604	106	7	loss	loss	NOUN
fuelectenerg-7604	106	8	(	(	PUNCT
fuelectenerg-7604	106	9	db	db	NOUN
fuelectenerg-7604	106	10	)	)	PUNCT
fuelectenerg-7604	106	11	-20	-20	PUNCT
fuelectenerg-7604	107	1	-43	-43	NUM
fuelectenerg-7604	107	2	-20	-20	PUNCT
fuelectenerg-7604	107	3	to	to	ADP
fuelectenerg-7604	107	4	63.2	63.2	NUM
fuelectenerg-7604	107	5	6	6	NUM
fuelectenerg-7604	107	6	.	.	PUNCT
fuelectenerg-7604	108	1	conclusion	conclusion	NOUN
fuelectenerg-7604	108	2	the	the	DET
fuelectenerg-7604	108	3	micro	micro	NOUN
fuelectenerg-7604	108	4	-	-	ADJ
fuelectenerg-7604	108	5	cantilever	cantilever	ADJ
fuelectenerg-7604	108	6	based	base	VERB
fuelectenerg-7604	108	7	electrostatically	electrostatically	ADV
fuelectenerg-7604	108	8	actuated	actuate	VERB
fuelectenerg-7604	108	9	shunt	shunt	NOUN
fuelectenerg-7604	108	10	capacitive	capacitive	ADJ
fuelectenerg-7604	108	11	rf	rf	VERB
fuelectenerg-7604	108	12	mems	mem	NOUN
fuelectenerg-7604	108	13	switch	switch	NOUN
fuelectenerg-7604	108	14	is	be	AUX
fuelectenerg-7604	108	15	designed	design	VERB
fuelectenerg-7604	108	16	and	and	CCONJ
fuelectenerg-7604	108	17	after	after	ADP
fuelectenerg-7604	108	18	multiple	multiple	ADJ
fuelectenerg-7604	108	19	iterations	iteration	NOUN
fuelectenerg-7604	108	20	on	on	ADP
fuelectenerg-7604	108	21	cantilever	cantilever	NOUN
fuelectenerg-7604	108	22	structure	structure	NOUN
fuelectenerg-7604	108	23	modification	modification	NOUN
fuelectenerg-7604	108	24	the	the	DET
fuelectenerg-7604	108	25	proposed	propose	VERB
fuelectenerg-7604	108	26	structure	structure	NOUN
fuelectenerg-7604	108	27	requires	require	VERB
fuelectenerg-7604	108	28	low	low	ADJ
fuelectenerg-7604	108	29	actuation	actuation	NOUN
fuelectenerg-7604	108	30	voltage	voltage	NOUN
fuelectenerg-7604	108	31	of	of	ADP
fuelectenerg-7604	108	32	3.34	3.34	NUM
fuelectenerg-7604	108	33	v	v	NOUN
fuelectenerg-7604	108	34	for	for	ADP
fuelectenerg-7604	108	35	3	3	NUM
fuelectenerg-7604	108	36	µm	µm	ADP
fuelectenerg-7604	108	37	deformation	deformation	NOUN
fuelectenerg-7604	108	38	.	.	PUNCT
fuelectenerg-7604	109	1	this	this	DET
fuelectenerg-7604	109	2	low	low	ADJ
fuelectenerg-7604	109	3	actuation	actuation	NOUN
fuelectenerg-7604	109	4	voltage	voltage	NOUN
fuelectenerg-7604	109	5	is	be	AUX
fuelectenerg-7604	109	6	a	a	DET
fuelectenerg-7604	109	7	result	result	NOUN
fuelectenerg-7604	109	8	of	of	ADP
fuelectenerg-7604	109	9	identifying	identify	VERB
fuelectenerg-7604	109	10	the	the	DET
fuelectenerg-7604	109	11	critical	critical	ADJ
fuelectenerg-7604	109	12	membrane	membrane	NOUN
fuelectenerg-7604	109	13	thickness	thickness	NOUN
fuelectenerg-7604	109	14	of	of	ADP
fuelectenerg-7604	109	15	0.5	0.5	NUM
fuelectenerg-7604	109	16	µm	µm	NOUN
fuelectenerg-7604	109	17	,	,	PUNCT
fuelectenerg-7604	109	18	and	and	CCONJ
fuelectenerg-7604	109	19	incorporating	incorporate	VERB
fuelectenerg-7604	109	20	two	two	NUM
fuelectenerg-7604	109	21	slots	slot	NOUN
fuelectenerg-7604	109	22	and	and	CCONJ
fuelectenerg-7604	109	23	an	an	DET
fuelectenerg-7604	109	24	array	array	NOUN
fuelectenerg-7604	109	25	of	of	ADP
fuelectenerg-7604	109	26	holes	hole	NOUN
fuelectenerg-7604	109	27	into	into	ADP
fuelectenerg-7604	109	28	the	the	DET
fuelectenerg-7604	109	29	membrane	membrane	NOUN
fuelectenerg-7604	109	30	.	.	PUNCT
fuelectenerg-7604	110	1	a	a	DET
fuelectenerg-7604	110	2	similar	similar	ADJ
fuelectenerg-7604	110	3	iterative	iterative	NOUN
fuelectenerg-7604	110	4	approach	approach	NOUN
fuelectenerg-7604	110	5	is	be	AUX
fuelectenerg-7604	110	6	used	use	VERB
fuelectenerg-7604	110	7	to	to	PART
fuelectenerg-7604	110	8	design	design	VERB
fuelectenerg-7604	110	9	the	the	DET
fuelectenerg-7604	110	10	final	final	ADJ
fuelectenerg-7604	110	11	rf	rf	ADJ
fuelectenerg-7604	110	12	mems	mem	NOUN
fuelectenerg-7604	110	13	switch	switch	NOUN
fuelectenerg-7604	110	14	.	.	PUNCT
fuelectenerg-7604	111	1	the	the	DET
fuelectenerg-7604	111	2	rf	rf	ADJ
fuelectenerg-7604	111	3	mems	mem	NOUN
fuelectenerg-7604	111	4	switch	switch	NOUN
fuelectenerg-7604	111	5	is	be	AUX
fuelectenerg-7604	111	6	micromachined	micromachine	VERB
fuelectenerg-7604	111	7	on	on	ADP
fuelectenerg-7604	111	8	a	a	DET
fuelectenerg-7604	111	9	cpw	cpw	NOUN
fuelectenerg-7604	111	10	transmission	transmission	NOUN
fuelectenerg-7604	111	11	line	line	NOUN
fuelectenerg-7604	111	12	with	with	ADP
fuelectenerg-7604	111	13	g	g	NOUN
fuelectenerg-7604	111	14	-	-	PUNCT
fuelectenerg-7604	111	15	s	s	NOUN
fuelectenerg-7604	111	16	-	-	PUNCT
fuelectenerg-7604	111	17	g	g	NOUN
fuelectenerg-7604	111	18	of	of	ADP
fuelectenerg-7604	111	19	85	85	NUM
fuelectenerg-7604	111	20	µm	µm	PART
fuelectenerg-7604	111	21	70	70	NUM
fuelectenerg-7604	111	22	µm	µm	ADP
fuelectenerg-7604	111	23	85	85	NUM
fuelectenerg-7604	111	24	µm	µm	NOUN
fuelectenerg-7604	111	25	.	.	PUNCT
fuelectenerg-7604	112	1	the	the	DET
fuelectenerg-7604	112	2	switch	switch	NOUN
fuelectenerg-7604	112	3	rf	rf	NOUN
fuelectenerg-7604	112	4	isolation	isolation	NOUN
fuelectenerg-7604	112	5	properties	property	NOUN
fuelectenerg-7604	112	6	are	be	AUX
fuelectenerg-7604	112	7	analyzed	analyze	VERB
fuelectenerg-7604	112	8	for	for	ADP
fuelectenerg-7604	112	9	different	different	ADJ
fuelectenerg-7604	112	10	high	high	ADJ
fuelectenerg-7604	112	11	dielectric	dielectric	ADJ
fuelectenerg-7604	112	12	constant	constant	ADJ
fuelectenerg-7604	112	13	thin	thin	ADJ
fuelectenerg-7604	112	14	films	film	NOUN
fuelectenerg-7604	112	15	including	include	VERB
fuelectenerg-7604	112	16	aln	aln	PROPN
fuelectenerg-7604	112	17	,	,	PUNCT
fuelectenerg-7604	112	18	gaas	gaas	NOUN
fuelectenerg-7604	112	19	,	,	PUNCT
fuelectenerg-7604	112	20	and	and	CCONJ
fuelectenerg-7604	112	21	hfo2	hfo2	PROPN
fuelectenerg-7604	112	22	.	.	PUNCT
fuelectenerg-7604	113	1	for	for	ADP
fuelectenerg-7604	113	2	all	all	DET
fuelectenerg-7604	113	3	the	the	DET
fuelectenerg-7604	113	4	dielectric	dielectric	ADJ
fuelectenerg-7604	113	5	thin	thin	ADJ
fuelectenerg-7604	113	6	films	film	NOUN
fuelectenerg-7604	113	7	the	the	DET
fuelectenerg-7604	113	8	rf	rf	ADJ
fuelectenerg-7604	113	9	mems	mem	NOUN
fuelectenerg-7604	113	10	switch	switch	NOUN
fuelectenerg-7604	113	11	shows	show	VERB
fuelectenerg-7604	113	12	a	a	DET
fuelectenerg-7604	113	13	high	high	ADJ
fuelectenerg-7604	113	14	isolation	isolation	NOUN
fuelectenerg-7604	113	15	of	of	ADP
fuelectenerg-7604	113	16	-63.2	-63.2	NOUN
fuelectenerg-7604	113	17	db	db	NOUN
fuelectenerg-7604	113	18	,	,	PUNCT
fuelectenerg-7604	113	19	but	but	CCONJ
fuelectenerg-7604	113	20	there	there	PRON
fuelectenerg-7604	113	21	is	be	VERB
fuelectenerg-7604	113	22	a	a	DET
fuelectenerg-7604	113	23	shift	shift	NOUN
fuelectenerg-7604	113	24	in	in	ADP
fuelectenerg-7604	113	25	the	the	DET
fuelectenerg-7604	113	26	radio	radio	NOUN
fuelectenerg-7604	113	27	frequency	frequency	NOUN
fuelectenerg-7604	113	28	.	.	PUNCT
fuelectenerg-7604	114	1	references	reference	NOUN
fuelectenerg-7604	114	2	[	[	X
fuelectenerg-7604	114	3	1	1	NUM
fuelectenerg-7604	114	4	]	]	PUNCT
fuelectenerg-7604	114	5	l.	l.	PROPN
fuelectenerg-7604	114	6	n.	n.	PROPN
fuelectenerg-7604	114	7	thalluri	thalluri	PROPN
fuelectenerg-7604	114	8	,	,	PUNCT
fuelectenerg-7604	114	9	k	k	PROPN
fuelectenerg-7604	114	10	v	v	PROPN
fuelectenerg-7604	114	11	v	v	X
fuelectenerg-7604	114	12	kumar	kumar	PROPN
fuelectenerg-7604	114	13	,	,	PUNCT
fuelectenerg-7604	114	14	k	k	PROPN
fuelectenerg-7604	114	15	r	r	PROPN
fuelectenerg-7604	114	16	sekhar	sekhar	PROPN
fuelectenerg-7604	114	17	,	,	PUNCT
fuelectenerg-7604	114	18	n	n	PROPN
fuelectenerg-7604	114	19	bhushana	bhushana	PROPN
fuelectenerg-7604	114	20	babu	babu	PROPN
fuelectenerg-7604	114	21	d	d	PROPN
fuelectenerg-7604	114	22	,	,	PUNCT
fuelectenerg-7604	114	23	s	s	PROPN
fuelectenerg-7604	114	24	s	s	X
fuelectenerg-7604	114	25	kiran	kiran	NOUN
fuelectenerg-7604	114	26	,	,	PUNCT
fuelectenerg-7604	114	27	koushik	koushik	PROPN
fuelectenerg-7604	114	28	guha	guha	PROPN
fuelectenerg-7604	114	29	,	,	PUNCT
fuelectenerg-7604	114	30	“	"	PUNCT
fuelectenerg-7604	114	31	iterative	iterative	ADJ
fuelectenerg-7604	114	32	approach	approach	NOUN
fuelectenerg-7604	114	33	and	and	CCONJ
fuelectenerg-7604	114	34	structure	structure	NOUN
fuelectenerg-7604	114	35	damping	damp	VERB
fuelectenerg-7604	114	36	analysis	analysis	NOUN
fuelectenerg-7604	114	37	to	to	PART
fuelectenerg-7604	114	38	advance	advance	VERB
fuelectenerg-7604	114	39	the	the	DET
fuelectenerg-7604	114	40	performance	performance	NOUN
fuelectenerg-7604	114	41	of	of	ADP
fuelectenerg-7604	114	42	shunt	shunt	NOUN
fuelectenerg-7604	114	43	capacitive	capacitive	ADJ
fuelectenerg-7604	114	44	rf	rf	NOUN
fuelectenerg-7604	114	45	mems	mem	NOUN
fuelectenerg-7604	114	46	switch	switch	NOUN
fuelectenerg-7604	114	47	”	"	PUNCT
fuelectenerg-7604	114	48	in	in	ADP
fuelectenerg-7604	114	49	proceedings	proceeding	NOUN
fuelectenerg-7604	114	50	of	of	ADP
fuelectenerg-7604	114	51	the	the	DET
fuelectenerg-7604	114	52	international	international	ADJ
fuelectenerg-7604	114	53	conference	conference	NOUN
fuelectenerg-7604	114	54	on	on	ADP
fuelectenerg-7604	114	55	micr	micr	PROPN
fuelectenerg-7604	114	56	/	/	SYM
fuelectenerg-7604	114	57	nano	nano	NOUN
fuelectenerg-7604	114	58	electronics	electronic	NOUN
fuelectenerg-7604	114	59	devices	device	NOUN
fuelectenerg-7604	114	60	,	,	PUNCT
fuelectenerg-7604	114	61	circuits	circuit	NOUN
fuelectenerg-7604	114	62	and	and	CCONJ
fuelectenerg-7604	114	63	systems	system	NOUN
fuelectenerg-7604	114	64	(	(	PUNCT
fuelectenerg-7604	114	65	mndcs2021	mndcs2021	PROPN
fuelectenerg-7604	114	66	)	)	PUNCT
fuelectenerg-7604	114	67	,	,	PUNCT
fuelectenerg-7604	114	68	30	30	NUM
fuelectenerg-7604	114	69	-	-	SYM
fuelectenerg-7604	114	70	31	31	NUM
fuelectenerg-7604	114	71	january	january	PROPN
fuelectenerg-7604	114	72	,	,	PUNCT
fuelectenerg-7604	114	73	2021	2021	NUM
fuelectenerg-7604	114	74	,	,	PUNCT
fuelectenerg-7604	114	75	india	india	PROPN
fuelectenerg-7604	114	76	.	.	PUNCT
fuelectenerg-7604	115	1	[	[	X
fuelectenerg-7604	115	2	2	2	X
fuelectenerg-7604	115	3	]	]	PUNCT
fuelectenerg-7604	115	4	h.	h.	PROPN
fuelectenerg-7604	115	5	r.	r.	PROPN
fuelectenerg-7604	115	6	ansari	ansari	PROPN
fuelectenerg-7604	115	7	,	,	PUNCT
fuelectenerg-7604	115	8	s.	s.	PROPN
fuelectenerg-7604	115	9	khosroabadi	khosroabadi	PROPN
fuelectenerg-7604	115	10	,	,	PUNCT
fuelectenerg-7604	115	11	“	"	PUNCT
fuelectenerg-7604	115	12	design	design	NOUN
fuelectenerg-7604	115	13	and	and	CCONJ
fuelectenerg-7604	115	14	simulation	simulation	NOUN
fuelectenerg-7604	115	15	of	of	ADP
fuelectenerg-7604	115	16	a	a	DET
fuelectenerg-7604	115	17	novel	novel	NOUN
fuelectenerg-7604	115	18	rf	rf	NOUN
fuelectenerg-7604	115	19	mems	mem	NOUN
fuelectenerg-7604	115	20	shunt	shunt	VERB
fuelectenerg-7604	115	21	capacitive	capacitive	ADJ
fuelectenerg-7604	115	22	switch	switch	NOUN
fuelectenerg-7604	115	23	with	with	ADP
fuelectenerg-7604	115	24	a	a	DET
fuelectenerg-7604	115	25	unique	unique	ADJ
fuelectenerg-7604	115	26	spring	spring	NOUN
fuelectenerg-7604	115	27	for	for	ADP
fuelectenerg-7604	115	28	ka	ka	NOUN
fuelectenerg-7604	115	29	-	-	PUNCT
fuelectenerg-7604	115	30	band	band	NOUN
fuelectenerg-7604	115	31	application	application	NOUN
fuelectenerg-7604	115	32	”	"	PUNCT
fuelectenerg-7604	115	33	,	,	PUNCT
fuelectenerg-7604	115	34	microsystem	microsystem	NOUN
fuelectenerg-7604	115	35	technologies	technology	NOUN
fuelectenerg-7604	115	36	,	,	PUNCT
fuelectenerg-7604	115	37	2018	2018	NUM
fuelectenerg-7604	115	38	.	.	PUNCT
fuelectenerg-7604	116	1	[	[	X
fuelectenerg-7604	116	2	3	3	X
fuelectenerg-7604	116	3	]	]	X
fuelectenerg-7604	116	4	l.	l.	PROPN
fuelectenerg-7604	116	5	n.	n.	PROPN
fuelectenerg-7604	116	6	cheulkar	cheulkar	PROPN
fuelectenerg-7604	116	7	,	,	PUNCT
fuelectenerg-7604	116	8	v.	v.	PROPN
fuelectenerg-7604	116	9	b.	b.	PROPN
fuelectenerg-7604	116	10	sawant	sawant	PROPN
fuelectenerg-7604	116	11	and	and	CCONJ
fuelectenerg-7604	116	12	s.	s.	PROPN
fuelectenerg-7604	116	13	s.	s.	PROPN
fuelectenerg-7604	116	14	mohite	mohite	PROPN
fuelectenerg-7604	116	15	,	,	PUNCT
fuelectenerg-7604	116	16	“	"	PUNCT
fuelectenerg-7604	116	17	evaluating	evaluate	VERB
fuelectenerg-7604	116	18	performance	performance	NOUN
fuelectenerg-7604	116	19	of	of	ADP
fuelectenerg-7604	116	20	thermally	thermally	ADV
fuelectenerg-7604	116	21	curled	curl	VERB
fuelectenerg-7604	116	22	microcantilever	microcantilever	ADJ
fuelectenerg-7604	116	23	rf	rf	NOUN
fuelectenerg-7604	116	24	mems	mems	PROPN
fuelectenerg-7604	116	25	switches	switch	NOUN
fuelectenerg-7604	116	26	”	"	PUNCT
fuelectenerg-7604	116	27	,	,	PUNCT
fuelectenerg-7604	116	28	materials	material	NOUN
fuelectenerg-7604	116	29	today	today	NOUN
fuelectenerg-7604	116	30	:	:	PUNCT
fuelectenerg-7604	116	31	proceedings	proceeding	NOUN
fuelectenerg-7604	116	32	,	,	PUNCT
fuelectenerg-7604	116	33	2019	2019	NUM
fuelectenerg-7604	116	34	.	.	PUNCT
fuelectenerg-7604	117	1	[	[	X
fuelectenerg-7604	117	2	4	4	X
fuelectenerg-7604	117	3	]	]	X
fuelectenerg-7604	117	4	v.	v.	PROPN
fuelectenerg-7604	117	5	v.	v.	PROPN
fuelectenerg-7604	117	6	reddy	reddy	PROPN
fuelectenerg-7604	117	7	,	,	PUNCT
fuelectenerg-7604	117	8	“	"	PUNCT
fuelectenerg-7604	117	9	frequency	frequency	NOUN
fuelectenerg-7604	117	10	reconfigurable	reconfigurable	ADJ
fuelectenerg-7604	117	11	fractal	fractal	ADJ
fuelectenerg-7604	117	12	patch	patch	NOUN
fuelectenerg-7604	117	13	circularly	circularly	ADV
fuelectenerg-7604	117	14	polarized	polarize	VERB
fuelectenerg-7604	117	15	antennas	antenna	NOUN
fuelectenerg-7604	117	16	for	for	ADP
fuelectenerg-7604	117	17	gsm	gsm	PROPN
fuelectenerg-7604	117	18	/	/	SYM
fuelectenerg-7604	117	19	wi	wi	PROPN
fuelectenerg-7604	117	20	-	-	PUNCT
fuelectenerg-7604	117	21	fi	fi	NOUN
fuelectenerg-7604	117	22	/	/	SYM
fuelectenerg-7604	117	23	wimax	wimax	PROPN
fuelectenerg-7604	117	24	applications	application	NOUN
fuelectenerg-7604	117	25	”	"	PUNCT
fuelectenerg-7604	117	26	,	,	PUNCT
fuelectenerg-7604	117	27	iete	iete	ADJ
fuelectenerg-7604	117	28	journal	journal	PROPN
fuelectenerg-7604	117	29	of	of	ADP
fuelectenerg-7604	117	30	research	research	NOUN
fuelectenerg-7604	117	31	,	,	PUNCT
fuelectenerg-7604	117	32	2019	2019	NUM
fuelectenerg-7604	117	33	.	.	PUNCT
fuelectenerg-7604	118	1	[	[	X
fuelectenerg-7604	118	2	5	5	NUM
fuelectenerg-7604	118	3	]	]	PUNCT
fuelectenerg-7604	118	4	m.	m.	NOUN
fuelectenerg-7604	118	5	perić	perić	PROPN
fuelectenerg-7604	118	6	,	,	PUNCT
fuelectenerg-7604	118	7	s.	s.	PROPN
fuelectenerg-7604	118	8	ilić	ilić	PROPN
fuelectenerg-7604	118	9	,	,	PUNCT
fuelectenerg-7604	118	10	s.	s.	PROPN
fuelectenerg-7604	118	11	aleksić	aleksić	PROPN
fuelectenerg-7604	118	12	,	,	PUNCT
fuelectenerg-7604	118	13	n.	n.	NOUN
fuelectenerg-7604	118	14	raičević	raičević	NOUN
fuelectenerg-7604	118	15	,	,	PUNCT
fuelectenerg-7604	118	16	m.	m.	NOUN
fuelectenerg-7604	118	17	bichurin	bichurin	NOUN
fuelectenerg-7604	118	18	,	,	PUNCT
fuelectenerg-7604	118	19	a.	a.	PROPN
fuelectenerg-7604	118	20	tatarenko	tatarenko	PROPN
fuelectenerg-7604	118	21	,	,	PUNCT
fuelectenerg-7604	118	22	r.	r.	PROPN
fuelectenerg-7604	118	23	petrov	petrov	PROPN
fuelectenerg-7604	118	24	,	,	PUNCT
fuelectenerg-7604	118	25	“	"	PUNCT
fuelectenerg-7604	118	26	covered	cover	VERB
fuelectenerg-7604	118	27	microstrip	microstrip	NOUN
fuelectenerg-7604	118	28	line	line	NOUN
fuelectenerg-7604	118	29	with	with	ADP
fuelectenerg-7604	118	30	ground	ground	NOUN
fuelectenerg-7604	118	31	planes	plane	NOUN
fuelectenerg-7604	118	32	of	of	ADP
fuelectenerg-7604	118	33	finite	finite	ADJ
fuelectenerg-7604	118	34	width	width	NOUN
fuelectenerg-7604	118	35	”	"	PUNCT
fuelectenerg-7604	118	36	,	,	PUNCT
fuelectenerg-7604	118	37	facta	facta	PROPN
fuelectenerg-7604	118	38	universitatis	universitatis	PROPN
fuelectenerg-7604	118	39	series	series	NOUN
fuelectenerg-7604	118	40	:	:	PUNCT
fuelectenerg-7604	118	41	electronics	electronic	NOUN
fuelectenerg-7604	118	42	and	and	CCONJ
fuelectenerg-7604	118	43	energetics	energetic	NOUN
fuelectenerg-7604	118	44	,	,	PUNCT
fuelectenerg-7604	118	45	vol	vol	NOUN
fuelectenerg-7604	118	46	.	.	PROPN
fuelectenerg-7604	118	47	27	27	NUM
fuelectenerg-7604	118	48	,	,	PUNCT
fuelectenerg-7604	118	49	no	no	INTJ
fuelectenerg-7604	118	50	.	.	NOUN
fuelectenerg-7604	118	51	4	4	NUM
fuelectenerg-7604	118	52	,	,	PUNCT
fuelectenerg-7604	118	53	2014	2014	NUM
fuelectenerg-7604	118	54	.	.	PUNCT
fuelectenerg-7604	119	1	[	[	X
fuelectenerg-7604	119	2	6	6	NUM
fuelectenerg-7604	119	3	]	]	PUNCT
fuelectenerg-7604	119	4	t.	t.	PROPN
fuelectenerg-7604	119	5	l.	l.	PROPN
fuelectenerg-7604	119	6	narayana	narayana	PROPN
fuelectenerg-7604	119	7	,	,	PUNCT
fuelectenerg-7604	119	8	k.	k.	PROPN
fuelectenerg-7604	119	9	g.	g.	PROPN
fuelectenerg-7604	119	10	sravani	sravani	PROPN
fuelectenerg-7604	119	11	&	&	CCONJ
fuelectenerg-7604	119	12	k.	k.	PROPN
fuelectenerg-7604	119	13	s.	s.	PROPN
fuelectenerg-7604	119	14	rao	rao	PROPN
fuelectenerg-7604	119	15	,	,	PUNCT
fuelectenerg-7604	119	16	“	"	PUNCT
fuelectenerg-7604	119	17	design	design	NOUN
fuelectenerg-7604	119	18	and	and	CCONJ
fuelectenerg-7604	119	19	analysis	analysis	NOUN
fuelectenerg-7604	119	20	of	of	ADP
fuelectenerg-7604	119	21	cpw	cpw	NOUN
fuelectenerg-7604	119	22	based	base	VERB
fuelectenerg-7604	119	23	shunt	shunt	NOUN
fuelectenerg-7604	119	24	capacitive	capacitive	ADJ
fuelectenerg-7604	119	25	rf	rf	NOUN
fuelectenerg-7604	119	26	mems	mem	NOUN
fuelectenerg-7604	119	27	switch	switch	NOUN
fuelectenerg-7604	119	28	”	"	PUNCT
fuelectenerg-7604	119	29	,	,	PUNCT
fuelectenerg-7604	119	30	cogent	cogent	NOUN
fuelectenerg-7604	119	31	engineering	engineering	NOUN
fuelectenerg-7604	119	32	,	,	PUNCT
fuelectenerg-7604	119	33	2017	2017	NUM
fuelectenerg-7604	119	34	.	.	PUNCT
fuelectenerg-7604	120	1	[	[	X
fuelectenerg-7604	120	2	7	7	X
fuelectenerg-7604	120	3	]	]	X
fuelectenerg-7604	120	4	s.	s.	PROPN
fuelectenerg-7604	120	5	agarwal	agarwal	PROPN
fuelectenerg-7604	120	6	,	,	PUNCT
fuelectenerg-7604	120	7	r.	r.	PROPN
fuelectenerg-7604	120	8	kashyap	kashyap	PROPN
fuelectenerg-7604	120	9	,	,	PUNCT
fuelectenerg-7604	120	10	k.	k.	PROPN
fuelectenerg-7604	120	11	guha	guha	PROPN
fuelectenerg-7604	120	12	,	,	PUNCT
fuelectenerg-7604	120	13	s.	s.	PROPN
fuelectenerg-7604	120	14	baishya	baishya	PROPN
fuelectenerg-7604	120	15	,	,	PUNCT
fuelectenerg-7604	120	16	“	"	PUNCT
fuelectenerg-7604	120	17	modeling	modeling	NOUN
fuelectenerg-7604	120	18	and	and	CCONJ
fuelectenerg-7604	120	19	analysis	analysis	NOUN
fuelectenerg-7604	120	20	of	of	ADP
fuelectenerg-7604	120	21	capacitance	capacitance	NOUN
fuelectenerg-7604	120	22	in	in	ADP
fuelectenerg-7604	120	23	consideration	consideration	NOUN
fuelectenerg-7604	120	24	of	of	ADP
fuelectenerg-7604	120	25	the	the	DET
fuelectenerg-7604	120	26	deformation	deformation	NOUN
fuelectenerg-7604	120	27	in	in	ADP
fuelectenerg-7604	120	28	rf	rf	NOUN
fuelectenerg-7604	120	29	mems	mem	NOUN
fuelectenerg-7604	120	30	shunt	shunt	NOUN
fuelectenerg-7604	120	31	switch	switch	NOUN
fuelectenerg-7604	120	32	”	"	PUNCT
fuelectenerg-7604	120	33	,	,	PUNCT
fuelectenerg-7604	120	34	super	super	ADJ
fuelectenerg-7604	120	35	lattices	lattice	NOUN
fuelectenerg-7604	120	36	and	and	CCONJ
fuelectenerg-7604	120	37	microstructures	microstructure	NOUN
fuelectenerg-7604	120	38	,	,	PUNCT
fuelectenerg-7604	120	39	2016	2016	NUM
fuelectenerg-7604	120	40	.	.	PUNCT
fuelectenerg-7604	121	1	[	[	X
fuelectenerg-7604	121	2	8	8	X
fuelectenerg-7604	121	3	]	]	PUNCT
fuelectenerg-7604	121	4	j.	j.	PROPN
fuelectenerg-7604	121	5	iannacci	iannacci	PROPN
fuelectenerg-7604	121	6	,	,	PUNCT
fuelectenerg-7604	121	7	“	"	PUNCT
fuelectenerg-7604	121	8	rf	rf	ADJ
fuelectenerg-7604	121	9	–	–	PUNCT
fuelectenerg-7604	121	10	mems	mem	NOUN
fuelectenerg-7604	121	11	for	for	ADP
fuelectenerg-7604	121	12	high	high	ADJ
fuelectenerg-7604	121	13	–	–	PUNCT
fuelectenerg-7604	121	14	performance	performance	NOUN
fuelectenerg-7604	121	15	and	and	CCONJ
fuelectenerg-7604	121	16	widely	widely	ADV
fuelectenerg-7604	121	17	reconfigurable	reconfigurable	ADJ
fuelectenerg-7604	121	18	passive	passive	ADJ
fuelectenerg-7604	121	19	components	component	NOUN
fuelectenerg-7604	121	20	–	–	PUNCT
fuelectenerg-7604	121	21	a	a	DET
fuelectenerg-7604	121	22	review	review	NOUN
fuelectenerg-7604	121	23	with	with	ADP
fuelectenerg-7604	121	24	focus	focus	NOUN
fuelectenerg-7604	121	25	on	on	ADP
fuelectenerg-7604	121	26	future	future	ADJ
fuelectenerg-7604	121	27	telecommunications	telecommunication	NOUN
fuelectenerg-7604	121	28	,	,	PUNCT
fuelectenerg-7604	121	29	internet	internet	NOUN
fuelectenerg-7604	121	30	of	of	ADP
fuelectenerg-7604	121	31	things	thing	NOUN
fuelectenerg-7604	121	32	(	(	PUNCT
fuelectenerg-7604	121	33	iot	iot	NOUN
fuelectenerg-7604	121	34	)	)	PUNCT
fuelectenerg-7604	121	35	and	and	CCONJ
fuelectenerg-7604	121	36	5	5	NUM
fuelectenerg-7604	121	37	g	g	NOUN
fuelectenerg-7604	121	38	applications	application	NOUN
fuelectenerg-7604	121	39	”	"	PUNCT
fuelectenerg-7604	121	40	,	,	PUNCT
fuelectenerg-7604	121	41	journal	journal	NOUN
fuelectenerg-7604	121	42	of	of	ADP
fuelectenerg-7604	121	43	king	king	PROPN
fuelectenerg-7604	121	44	saud	saud	PROPN
fuelectenerg-7604	121	45	university	university	PROPN
fuelectenerg-7604	121	46	science	science	NOUN
fuelectenerg-7604	121	47	,	,	PUNCT
fuelectenerg-7604	121	48	2017	2017	NUM
fuelectenerg-7604	121	49	.	.	PUNCT
fuelectenerg-7604	122	1	392	392	NUM
fuelectenerg-7604	122	2	l.	l.	PROPN
fuelectenerg-7604	122	3	n.	n.	PROPN
fuelectenerg-7604	122	4	thalluri	thalluri	PROPN
fuelectenerg-7604	122	5	,	,	PUNCT
fuelectenerg-7604	122	6	k	k	PROPN
fuelectenerg-7604	122	7	v	v	PROPN
fuelectenerg-7604	122	8	v	v	X
fuelectenerg-7604	122	9	kumar	kumar	PROPN
fuelectenerg-7604	122	10	,	,	PUNCT
fuelectenerg-7604	122	11	k.	k.	PROPN
fuelectenerg-7604	122	12	r.	r.	PROPN
fuelectenerg-7604	122	13	sekhar	sekhar	PROPN
fuelectenerg-7604	122	14	,	,	PUNCT
fuelectenerg-7604	122	15	n	n	PROPN
fuelectenerg-7604	122	16	b	b	PROPN
fuelectenerg-7604	122	17	babu	babu	PROPN
fuelectenerg-7604	122	18	d.3	d.3	PROPN
fuelectenerg-7604	122	19	,	,	PUNCT
fuelectenerg-7604	122	20	s	s	PART
fuelectenerg-7604	122	21	s	s	X
fuelectenerg-7604	122	22	kiran	kiran	NOUN
fuelectenerg-7604	122	23	,	,	PUNCT
fuelectenerg-7604	122	24	k.	k.	PROPN
fuelectenerg-7604	122	25	guha	guha	PROPN
fuelectenerg-7604	123	1	[	[	X
fuelectenerg-7604	123	2	9	9	NUM
fuelectenerg-7604	123	3	]	]	PUNCT
fuelectenerg-7604	123	4	j.	j.	PROPN
fuelectenerg-7604	123	5	iannacci	iannacci	PROPN
fuelectenerg-7604	123	6	,	,	PUNCT
fuelectenerg-7604	123	7	“	"	PUNCT
fuelectenerg-7604	123	8	rf	rf	ADJ
fuelectenerg-7604	123	9	-	-	PUNCT
fuelectenerg-7604	123	10	mems	mems	ADJ
fuelectenerg-7604	123	11	technology	technology	NOUN
fuelectenerg-7604	123	12	as	as	ADP
fuelectenerg-7604	123	13	an	an	DET
fuelectenerg-7604	123	14	enabler	enabler	NOUN
fuelectenerg-7604	123	15	of	of	ADP
fuelectenerg-7604	123	16	5	5	NUM
fuelectenerg-7604	123	17	g	g	NOUN
fuelectenerg-7604	123	18	:	:	PUNCT
fuelectenerg-7604	123	19	low	low	ADJ
fuelectenerg-7604	123	20	-	-	PUNCT
fuelectenerg-7604	123	21	loss	loss	NOUN
fuelectenerg-7604	123	22	ohmic	ohmic	ADJ
fuelectenerg-7604	123	23	switch	switch	NOUN
fuelectenerg-7604	123	24	tested	test	VERB
fuelectenerg-7604	123	25	up	up	ADP
fuelectenerg-7604	123	26	to	to	ADP
fuelectenerg-7604	123	27	110	110	NUM
fuelectenerg-7604	123	28	ghz	ghz	NOUN
fuelectenerg-7604	123	29	”	"	PUNCT
fuelectenerg-7604	123	30	,	,	PUNCT
fuelectenerg-7604	123	31	sensors	sensor	NOUN
fuelectenerg-7604	123	32	and	and	CCONJ
fuelectenerg-7604	123	33	actuators	actuator	NOUN
fuelectenerg-7604	123	34	a	a	DET
fuelectenerg-7604	123	35	,	,	PUNCT
fuelectenerg-7604	123	36	vol	vol	NOUN
fuelectenerg-7604	123	37	.	.	NOUN
fuelectenerg-7604	123	38	279	279	NUM
fuelectenerg-7604	123	39	,	,	PUNCT
fuelectenerg-7604	123	40	pp	pp	ADJ
fuelectenerg-7604	123	41	.	.	PUNCT
fuelectenerg-7604	124	1	624–629	624–629	NUM
fuelectenerg-7604	124	2	,	,	PUNCT
fuelectenerg-7604	124	3	2018	2018	NUM
fuelectenerg-7604	124	4	.	.	PUNCT
fuelectenerg-7604	125	1	[	[	X
fuelectenerg-7604	125	2	10	10	NUM
fuelectenerg-7604	125	3	]	]	PUNCT
fuelectenerg-7604	125	4	t.	t.	NOUN
fuelectenerg-7604	125	5	ciric	ciric	NOUN
fuelectenerg-7604	125	6	,	,	PUNCT
fuelectenerg-7604	125	7	z.	z.	PROPN
fuelectenerg-7604	125	8	marinković	marinković	PROPN
fuelectenerg-7604	125	9	,	,	PUNCT
fuelectenerg-7604	125	10	r.	r.	PROPN
fuelectenerg-7604	125	11	dhuri	dhuri	PROPN
fuelectenerg-7604	125	12	,	,	PUNCT
fuelectenerg-7604	125	13	o.	o.	PROPN
fuelectenerg-7604	125	14	pronić	pronić	NOUN
fuelectenerg-7604	125	15	-	-	PUNCT
fuelectenerg-7604	125	16	rančić	rančić	ADJ
fuelectenerg-7604	125	17	,	,	PUNCT
fuelectenerg-7604	125	18	v.	v.	PROPN
fuelectenerg-7604	125	19	marković	marković	NOUN
fuelectenerg-7604	125	20	,	,	PUNCT
fuelectenerg-7604	125	21	“	"	PUNCT
fuelectenerg-7604	125	22	hybrid	hybrid	ADJ
fuelectenerg-7604	125	23	neural	neural	NOUN
fuelectenerg-7604	125	24	lumped	lump	VERB
fuelectenerg-7604	125	25	element	element	NOUN
fuelectenerg-7604	125	26	approach	approach	NOUN
fuelectenerg-7604	125	27	in	in	ADP
fuelectenerg-7604	125	28	inverse	inverse	NOUN
fuelectenerg-7604	125	29	modeling	modeling	NOUN
fuelectenerg-7604	125	30	of	of	ADP
fuelectenerg-7604	125	31	rf	rf	NOUN
fuelectenerg-7604	125	32	mems	mem	NOUN
fuelectenerg-7604	125	33	switches	switch	NOUN
fuelectenerg-7604	125	34	”	"	PUNCT
fuelectenerg-7604	125	35	,	,	PUNCT
fuelectenerg-7604	125	36	facta	facta	PROPN
fuelectenerg-7604	125	37	universitatis	universitatis	PROPN
fuelectenerg-7604	125	38	series	series	NOUN
fuelectenerg-7604	125	39	:	:	PUNCT
fuelectenerg-7604	125	40	electronics	electronic	NOUN
fuelectenerg-7604	125	41	and	and	CCONJ
fuelectenerg-7604	125	42	energetics	energetic	NOUN
fuelectenerg-7604	125	43	,	,	PUNCT
fuelectenerg-7604	125	44	vol	vol	NOUN
fuelectenerg-7604	125	45	.	.	PROPN
fuelectenerg-7604	126	1	33	33	NUM
fuelectenerg-7604	126	2	no	no	NOUN
fuelectenerg-7604	126	3	.	.	NOUN
fuelectenerg-7604	126	4	1	1	NUM
fuelectenerg-7604	126	5	,	,	PUNCT
fuelectenerg-7604	126	6	2020	2020	NUM
fuelectenerg-7604	126	7	.	.	PUNCT
fuelectenerg-7604	127	1	[	[	X
fuelectenerg-7604	127	2	11	11	NUM
fuelectenerg-7604	127	3	]	]	PUNCT
fuelectenerg-7604	127	4	h.	h.	PROPN
fuelectenerg-7604	127	5	kuisma	kuisma	PROPN
fuelectenerg-7604	127	6	,	,	PUNCT
fuelectenerg-7604	127	7	a.	a.	NOUN
fuelectenerg-7604	127	8	cardoso	cardoso	PROPN
fuelectenerg-7604	127	9	,	,	PUNCT
fuelectenerg-7604	127	10	t.	t.	NOUN
fuelectenerg-7604	127	11	braun	braun	NOUN
fuelectenerg-7604	127	12	,	,	PUNCT
fuelectenerg-7604	127	13	“	"	PUNCT
fuelectenerg-7604	127	14	fan	fan	NOUN
fuelectenerg-7604	127	15	-	-	PUNCT
fuelectenerg-7604	127	16	out	out	ADP
fuelectenerg-7604	127	17	wafer	wafer	NOUN
fuelectenerg-7604	127	18	-	-	PUNCT
fuelectenerg-7604	127	19	level	level	NOUN
fuelectenerg-7604	127	20	packaging	packaging	NOUN
fuelectenerg-7604	127	21	as	as	ADP
fuelectenerg-7604	127	22	packaging	packaging	NOUN
fuelectenerg-7604	127	23	technology	technology	NOUN
fuelectenerg-7604	127	24	for	for	ADP
fuelectenerg-7604	127	25	mems	mem	NOUN
fuelectenerg-7604	127	26	”	"	PUNCT
fuelectenerg-7604	127	27	,	,	PUNCT
fuelectenerg-7604	127	28	2020	2020	NUM
fuelectenerg-7604	127	29	.	.	PUNCT
fuelectenerg-7604	128	1	[	[	X
fuelectenerg-7604	128	2	12	12	NUM
fuelectenerg-7604	128	3	]	]	X
fuelectenerg-7604	128	4	r.	r.	PROPN
fuelectenerg-7604	128	5	laishram	laishram	PROPN
fuelectenerg-7604	128	6	,	,	PUNCT
fuelectenerg-7604	128	7	o.	o.	PROPN
fuelectenerg-7604	128	8	p.	p.	PROPN
fuelectenerg-7604	128	9	thakur	thakur	PROPN
fuelectenerg-7604	128	10	,	,	PUNCT
fuelectenerg-7604	128	11	d.	d.	PROPN
fuelectenerg-7604	128	12	k.	k.	PROPN
fuelectenerg-7604	128	13	bhattacharya	bhattacharya	PROPN
fuelectenerg-7604	128	14	,	,	PUNCT
fuelectenerg-7604	128	15	harsh	harsh	ADJ
fuelectenerg-7604	128	16	,	,	PUNCT
fuelectenerg-7604	128	17	anshu	anshu	NOUN
fuelectenerg-7604	128	18	goyal	goyal	PROPN
fuelectenerg-7604	128	19	,	,	PUNCT
fuelectenerg-7604	128	20	renu	renu	PROPN
fuelectenerg-7604	128	21	sharma	sharma	PROPN
fuelectenerg-7604	128	22	,	,	PUNCT
fuelectenerg-7604	128	23	jagbir	jagbir	PROPN
fuelectenerg-7604	128	24	singh	singh	PROPN
fuelectenerg-7604	128	25	,	,	PUNCT
fuelectenerg-7604	128	26	and	and	CCONJ
fuelectenerg-7604	128	27	ramjay	ramjay	VERB
fuelectenerg-7604	128	28	pal	pal	NOUN
fuelectenerg-7604	128	29	,	,	PUNCT
fuelectenerg-7604	128	30	“	"	PUNCT
fuelectenerg-7604	128	31	low	low	ADJ
fuelectenerg-7604	128	32	temperature	temperature	NOUN
fuelectenerg-7604	128	33	deposited	deposit	VERB
fuelectenerg-7604	128	34	bst	bst	PROPN
fuelectenerg-7604	128	35	thin	thin	ADJ
fuelectenerg-7604	128	36	films	film	NOUN
fuelectenerg-7604	128	37	for	for	ADP
fuelectenerg-7604	128	38	rf	rf	NOUN
fuelectenerg-7604	128	39	mems	mem	NOUN
fuelectenerg-7604	128	40	switch	switch	NOUN
fuelectenerg-7604	128	41	”	"	PUNCT
fuelectenerg-7604	128	42	,	,	PUNCT
fuelectenerg-7604	128	43	integrated	integrated	ADJ
fuelectenerg-7604	128	44	ferroelectrics	ferroelectric	NOUN
fuelectenerg-7604	128	45	,	,	PUNCT
fuelectenerg-7604	128	46	vol	vol	NOUN
fuelectenerg-7604	128	47	.	.	PROPN
fuelectenerg-7604	129	1	116	116	NUM
fuelectenerg-7604	129	2	,	,	PUNCT
fuelectenerg-7604	129	3	pp	pp	ADJ
fuelectenerg-7604	129	4	.	.	PUNCT
fuelectenerg-7604	130	1	35–40	35–40	NUM
fuelectenerg-7604	130	2	,	,	PUNCT
fuelectenerg-7604	130	3	2010	2010	NUM
fuelectenerg-7604	130	4	.	.	PUNCT
fuelectenerg-7604	131	1	[	[	X
fuelectenerg-7604	131	2	13	13	NUM
fuelectenerg-7604	131	3	]	]	SYM
fuelectenerg-7604	131	4	i.	i.	PROPN
fuelectenerg-7604	131	5	tittonen	tittonen	PROPN
fuelectenerg-7604	131	6	,	,	PUNCT
fuelectenerg-7604	131	7	m.	m.	NOUN
fuelectenerg-7604	131	8	koskenvuori	koskenvuori	PROPN
fuelectenerg-7604	131	9	,	,	PUNCT
fuelectenerg-7604	131	10	“	"	PUNCT
fuelectenerg-7604	131	11	electrostatic	electrostatic	ADJ
fuelectenerg-7604	131	12	and	and	CCONJ
fuelectenerg-7604	131	13	rf	rf	NOUN
fuelectenerg-7604	131	14	-	-	NOUN
fuelectenerg-7604	131	15	properties	property	NOUN
fuelectenerg-7604	131	16	of	of	ADP
fuelectenerg-7604	131	17	mems	mem	NOUN
fuelectenerg-7604	131	18	structures	structure	NOUN
fuelectenerg-7604	131	19	”	"	PUNCT
fuelectenerg-7604	131	20	,	,	PUNCT
fuelectenerg-7604	131	21	silicon	silicon	NOUN
fuelectenerg-7604	131	22	based	base	VERB
fuelectenerg-7604	131	23	mems	mem	NOUN
fuelectenerg-7604	131	24	materials	material	NOUN
fuelectenerg-7604	131	25	and	and	CCONJ
fuelectenerg-7604	131	26	technologies	technology	NOUN
fuelectenerg-7604	131	27	,	,	PUNCT
fuelectenerg-7604	131	28	2020	2020	NUM
fuelectenerg-7604	131	29	.	.	PUNCT
fuelectenerg-7604	132	1	[	[	X
fuelectenerg-7604	132	2	14	14	NUM
fuelectenerg-7604	132	3	]	]	X
fuelectenerg-7604	132	4	t.	t.	PROPN
fuelectenerg-7604	132	5	singh	singh	PROPN
fuelectenerg-7604	132	6	,	,	PUNCT
fuelectenerg-7604	132	7	a.	a.	PROPN
fuelectenerg-7604	132	8	elhady	elhady	PROPN
fuelectenerg-7604	132	9	,	,	PUNCT
fuelectenerg-7604	132	10	h.	h.	PROPN
fuelectenerg-7604	132	11	jia	jia	PROPN
fuelectenerg-7604	132	12	,	,	PUNCT
fuelectenerg-7604	132	13	a.	a.	NOUN
fuelectenerg-7604	132	14	mojdeh	mojdeh	PROPN
fuelectenerg-7604	132	15	,	,	PUNCT
fuelectenerg-7604	132	16	c.	c.	PROPN
fuelectenerg-7604	132	17	kaplan	kaplan	PROPN
fuelectenerg-7604	132	18	,	,	PUNCT
fuelectenerg-7604	132	19	v.	v.	PROPN
fuelectenerg-7604	132	20	sharma	sharma	PROPN
fuelectenerg-7604	132	21	,	,	PUNCT
fuelectenerg-7604	132	22	m.	m.	PROPN
fuelectenerg-7604	132	23	basha	basha	PROPN
fuelectenerg-7604	132	24	,	,	PUNCT
fuelectenerg-7604	132	25	e.	e.	PROPN
fuelectenerg-7604	132	26	abdel	abdel	PROPN
fuelectenerg-7604	132	27	-	-	PUNCT
fuelectenerg-7604	132	28	rahman	rahman	PROPN
fuelectenerg-7604	132	29	,	,	PUNCT
fuelectenerg-7604	132	30	“	"	PUNCT
fuelectenerg-7604	132	31	modeling	modeling	NOUN
fuelectenerg-7604	132	32	of	of	ADP
fuelectenerg-7604	132	33	low	low	ADV
fuelectenerg-7604	132	34	-	-	PUNCT
fuelectenerg-7604	132	35	damping	damp	VERB
fuelectenerg-7604	132	36	laterally	laterally	ADV
fuelectenerg-7604	132	37	actuated	actuate	VERB
fuelectenerg-7604	132	38	electrostatic	electrostatic	ADJ
fuelectenerg-7604	132	39	mems	mem	NOUN
fuelectenerg-7604	132	40	”	"	PUNCT
fuelectenerg-7604	132	41	,	,	PUNCT
fuelectenerg-7604	132	42	mechatronics	mechatronic	NOUN
fuelectenerg-7604	132	43	,	,	PUNCT
fuelectenerg-7604	132	44	vol	vol	NOUN
fuelectenerg-7604	132	45	.	.	PROPN
fuelectenerg-7604	132	46	52	52	NUM
fuelectenerg-7604	132	47	,	,	PUNCT
fuelectenerg-7604	132	48	2018	2018	NUM
fuelectenerg-7604	132	49	.	.	PUNCT
fuelectenerg-7604	133	1	[	[	X
fuelectenerg-7604	133	2	15	15	X
fuelectenerg-7604	133	3	]	]	X
fuelectenerg-7604	133	4	t.	t.	NOUN
fuelectenerg-7604	133	5	zengerle	zengerle	PROPN
fuelectenerg-7604	133	6	,	,	PUNCT
fuelectenerg-7604	133	7	j.	j.	PROPN
fuelectenerg-7604	133	8	joppich	joppich	PROPN
fuelectenerg-7604	133	9	,	,	PUNCT
fuelectenerg-7604	133	10	p.	p.	PROPN
fuelectenerg-7604	133	11	schwarz	schwarz	PROPN
fuelectenerg-7604	133	12	,	,	PUNCT
fuelectenerg-7604	133	13	a.	a.	NOUN
fuelectenerg-7604	133	14	ababneh	ababneh	PROPN
fuelectenerg-7604	133	15	,	,	PUNCT
fuelectenerg-7604	133	16	h.	h.	PROPN
fuelectenerg-7604	133	17	seidel	seidel	PROPN
fuelectenerg-7604	133	18	,	,	PUNCT
fuelectenerg-7604	133	19	“	"	PUNCT
fuelectenerg-7604	133	20	modeling	model	VERB
fuelectenerg-7604	133	21	the	the	DET
fuelectenerg-7604	133	22	damping	damp	VERB
fuelectenerg-7604	133	23	mechanism	mechanism	NOUN
fuelectenerg-7604	133	24	of	of	ADP
fuelectenerg-7604	133	25	mems	mem	NOUN
fuelectenerg-7604	133	26	oscillators	oscillator	NOUN
fuelectenerg-7604	133	27	in	in	ADP
fuelectenerg-7604	133	28	the	the	DET
fuelectenerg-7604	133	29	transitional	transitional	ADJ
fuelectenerg-7604	133	30	flow	flow	NOUN
fuelectenerg-7604	133	31	regime	regime	NOUN
fuelectenerg-7604	133	32	with	with	ADP
fuelectenerg-7604	133	33	thermal	thermal	ADJ
fuelectenerg-7604	133	34	waves	wave	NOUN
fuelectenerg-7604	133	35	”	"	PUNCT
fuelectenerg-7604	133	36	,	,	PUNCT
fuelectenerg-7604	133	37	sensors	sensor	NOUN
fuelectenerg-7604	133	38	and	and	CCONJ
fuelectenerg-7604	133	39	actuators	actuator	NOUN
fuelectenerg-7604	133	40	:	:	PUNCT
fuelectenerg-7604	133	41	a.	a.	NOUN
fuelectenerg-7604	133	42	physical	physical	PROPN
fuelectenerg-7604	133	43	,	,	PUNCT
fuelectenerg-7604	133	44	2020	2020	NUM
fuelectenerg-7604	133	45	.	.	PUNCT
fuelectenerg-7604	134	1	[	[	X
fuelectenerg-7604	134	2	16	16	NUM
fuelectenerg-7604	134	3	]	]	X
fuelectenerg-7604	134	4	j.	j.	PROPN
fuelectenerg-7604	134	5	kaczynski	kaczynski	PROPN
fuelectenerg-7604	134	6	,	,	PUNCT
fuelectenerg-7604	134	7	c.	c.	PROPN
fuelectenerg-7604	134	8	ranacher	ranacher	PROPN
fuelectenerg-7604	134	9	,	,	PUNCT
fuelectenerg-7604	134	10	c.	c.	PROPN
fuelectenerg-7604	134	11	fleury	fleury	PROPN
fuelectenerg-7604	134	12	,	,	PUNCT
fuelectenerg-7604	134	13	“	"	PUNCT
fuelectenerg-7604	134	14	computationally	computationally	ADV
fuelectenerg-7604	134	15	efficient	efficient	ADJ
fuelectenerg-7604	134	16	model	model	NOUN
fuelectenerg-7604	134	17	for	for	ADP
fuelectenerg-7604	134	18	viscous	viscous	ADJ
fuelectenerg-7604	134	19	damping	damping	NOUN
fuelectenerg-7604	134	20	in	in	ADP
fuelectenerg-7604	134	21	perforated	perforate	VERB
fuelectenerg-7604	134	22	mems	mem	NOUN
fuelectenerg-7604	134	23	structures	structure	NOUN
fuelectenerg-7604	134	24	”	"	PUNCT
fuelectenerg-7604	134	25	,	,	PUNCT
fuelectenerg-7604	134	26	sensors	sensor	NOUN
fuelectenerg-7604	134	27	and	and	CCONJ
fuelectenerg-7604	134	28	actuators	actuator	NOUN
fuelectenerg-7604	134	29	a	a	PRON
fuelectenerg-7604	134	30	,	,	PUNCT
fuelectenerg-7604	134	31	vol	vol	NOUN
fuelectenerg-7604	134	32	.	.	PROPN
fuelectenerg-7604	134	33	314	314	NUM
fuelectenerg-7604	134	34	,	,	PUNCT
fuelectenerg-7604	134	35	2020	2020	NUM
fuelectenerg-7604	134	36	.	.	PUNCT
fuelectenerg-7604	135	1	[	[	X
fuelectenerg-7604	135	2	17	17	NUM
fuelectenerg-7604	135	3	]	]	PUNCT
fuelectenerg-7604	135	4	m.	m.	NOUN
fuelectenerg-7604	135	5	angira	angira	PROPN
fuelectenerg-7604	135	6	,	,	PUNCT
fuelectenerg-7604	135	7	d.	d.	PROPN
fuelectenerg-7604	135	8	bansal	bansal	PROPN
fuelectenerg-7604	135	9	,	,	PUNCT
fuelectenerg-7604	135	10	p.	p.	PROPN
fuelectenerg-7604	135	11	kumar	kumar	PROPN
fuelectenerg-7604	135	12	,	,	PUNCT
fuelectenerg-7604	135	13	k.	k.	PROPN
fuelectenerg-7604	135	14	mehta	mehta	PROPN
fuelectenerg-7604	135	15	,	,	PUNCT
fuelectenerg-7604	135	16	k.	k.	PROPN
fuelectenerg-7604	135	17	rangra	rangra	PROPN
fuelectenerg-7604	135	18	,	,	PUNCT
fuelectenerg-7604	135	19	“	"	PUNCT
fuelectenerg-7604	135	20	a	a	DET
fuelectenerg-7604	135	21	novel	novel	ADJ
fuelectenerg-7604	135	22	capacitive	capacitive	ADJ
fuelectenerg-7604	135	23	rf	rf	NOUN
fuelectenerg-7604	135	24	-	-	PUNCT
fuelectenerg-7604	135	25	mems	mems	ADJ
fuelectenerg-7604	135	26	switch	switch	NOUN
fuelectenerg-7604	135	27	for	for	ADP
fuelectenerg-7604	135	28	multifrequency	multifrequency	NOUN
fuelectenerg-7604	135	29	operation	operation	NOUN
fuelectenerg-7604	135	30	”	"	PUNCT
fuelectenerg-7604	135	31	,	,	PUNCT
fuelectenerg-7604	135	32	superlattices	superlattice	NOUN
fuelectenerg-7604	135	33	and	and	CCONJ
fuelectenerg-7604	135	34	microstructures	microstructure	NOUN
fuelectenerg-7604	135	35	,	,	PUNCT
fuelectenerg-7604	135	36	vol	vol	NOUN
fuelectenerg-7604	135	37	.	.	PROPN
fuelectenerg-7604	135	38	133	133	NUM
fuelectenerg-7604	135	39	,	,	PUNCT
fuelectenerg-7604	135	40	2019	2019	NUM
fuelectenerg-7604	135	41	.	.	PUNCT
fuelectenerg-7604	136	1	[	[	X
fuelectenerg-7604	136	2	18	18	NUM
fuelectenerg-7604	136	3	]	]	X
fuelectenerg-7604	136	4	o.	o.	PROPN
fuelectenerg-7604	136	5	pertin	pertin	PROPN
fuelectenerg-7604	136	6	,	,	PUNCT
fuelectenerg-7604	136	7	kurmendra	kurmendra	PROPN
fuelectenerg-7604	136	8	,	,	PUNCT
fuelectenerg-7604	136	9	“	"	PUNCT
fuelectenerg-7604	136	10	pull	pull	VERB
fuelectenerg-7604	136	11	-	-	PUNCT
fuelectenerg-7604	136	12	in	in	ADP
fuelectenerg-7604	136	13	-	-	PUNCT
fuelectenerg-7604	136	14	voltage	voltage	NOUN
fuelectenerg-7604	136	15	and	and	CCONJ
fuelectenerg-7604	136	16	rf	rf	NOUN
fuelectenerg-7604	136	17	analysis	analysis	NOUN
fuelectenerg-7604	136	18	of	of	ADP
fuelectenerg-7604	136	19	mems	mem	NOUN
fuelectenerg-7604	136	20	based	base	VERB
fuelectenerg-7604	136	21	high	high	ADJ
fuelectenerg-7604	136	22	performance	performance	NOUN
fuelectenerg-7604	136	23	capacitive	capacitive	ADJ
fuelectenerg-7604	136	24	shunt	shunt	NOUN
fuelectenerg-7604	136	25	switch	switch	NOUN
fuelectenerg-7604	136	26	”	"	PUNCT
fuelectenerg-7604	136	27	,	,	PUNCT
fuelectenerg-7604	136	28	microelectronics	microelectronic	NOUN
fuelectenerg-7604	136	29	journal	journal	NOUN
fuelectenerg-7604	136	30	,	,	PUNCT
fuelectenerg-7604	136	31	vol	vol	NOUN
fuelectenerg-7604	136	32	.	.	PROPN
fuelectenerg-7604	136	33	77	77	NUM
fuelectenerg-7604	136	34	,	,	PUNCT
fuelectenerg-7604	136	35	2018	2018	NUM
fuelectenerg-7604	136	36	.	.	PUNCT