id	sid	tid	token	lemma	pos
fuelectenerg-900	1	1	instruction	instruction	NOUN
fuelectenerg-900	1	2	facta	facta	PROPN
fuelectenerg-900	1	3	universitatis	universitatis	PROPN
fuelectenerg-900	1	4	series	series	NOUN
fuelectenerg-900	1	5	:	:	PUNCT
fuelectenerg-900	1	6	electronics	electronic	NOUN
fuelectenerg-900	1	7	and	and	CCONJ
fuelectenerg-900	1	8	energetics	energetics	NOUN
fuelectenerg-900	1	9	vol	vol	NOUN
fuelectenerg-900	1	10	.	.	PUNCT
fuelectenerg-900	1	11	28	28	NUM
fuelectenerg-900	1	12	,	,	PUNCT
fuelectenerg-900	1	13	no	no	DET
fuelectenerg-900	1	14	3	3	NUM
fuelectenerg-900	1	15	,	,	PUNCT
fuelectenerg-900	1	16	september	september	PROPN
fuelectenerg-900	1	17	2015	2015	NUM
fuelectenerg-900	1	18	,	,	PUNCT
fuelectenerg-900	1	19	pp	pp	ADJ
fuelectenerg-900	1	20	.	.	PUNCT
fuelectenerg-900	2	1	345	345	NUM
fuelectenerg-900	2	2	381	381	NUM
fuelectenerg-900	2	3	doi	doi	NOUN
fuelectenerg-900	2	4	:	:	PUNCT
fuelectenerg-900	2	5	10.2298	10.2298	NUM
fuelectenerg-900	2	6	/	/	SYM
fuelectenerg-900	2	7	fuee1503345j	fuee1503345j	PROPN
fuelectenerg-900	2	8	rf	rf	NOUN
fuelectenerg-900	2	9	mems	mem	NOUN
fuelectenerg-900	2	10	/	/	SYM
fuelectenerg-900	2	11	nems	nem	NOUN
fuelectenerg-900	2	12	resonators	resonator	NOUN
fuelectenerg-900	2	13	for	for	ADP
fuelectenerg-900	2	14	wireless	wireless	ADJ
fuelectenerg-900	2	15	communication	communication	NOUN
fuelectenerg-900	2	16	systems	system	NOUN
fuelectenerg-900	2	17	and	and	CCONJ
fuelectenerg-900	2	18	adsorptiondesorption	adsorptiondesorption	NOUN
fuelectenerg-900	2	19	phase	phase	NOUN
fuelectenerg-900	2	20	noise	noise	NOUN
fuelectenerg-900	2	21			VERB
fuelectenerg-900	2	22	ivana	ivana	PROPN
fuelectenerg-900	2	23	jokić	jokić	PROPN
fuelectenerg-900	2	24	1,2	1,2	NUM
fuelectenerg-900	2	25	,	,	PUNCT
fuelectenerg-900	2	26	miloš	miloš	NOUN
fuelectenerg-900	2	27	frantlović	frantlović	NOUN
fuelectenerg-900	2	28	1,2	1,2	NUM
fuelectenerg-900	2	29	,	,	PUNCT
fuelectenerg-900	2	30	zoran	zoran	PROPN
fuelectenerg-900	2	31	djurić	djurić	VERB
fuelectenerg-900	2	32	3	3	NUM
fuelectenerg-900	2	33	,	,	PUNCT
fuelectenerg-900	2	34	miroslav	miroslav	PROPN
fuelectenerg-900	2	35	l.	l.	PROPN
fuelectenerg-900	2	36	dukić	dukić	PROPN
fuelectenerg-900	2	37	4	4	NUM
fuelectenerg-900	2	38	1	1	NUM
fuelectenerg-900	2	39	school	school	NOUN
fuelectenerg-900	2	40	of	of	ADP
fuelectenerg-900	2	41	electrical	electrical	ADJ
fuelectenerg-900	2	42	engineering	engineering	NOUN
fuelectenerg-900	2	43	,	,	PUNCT
fuelectenerg-900	2	44	university	university	PROPN
fuelectenerg-900	2	45	of	of	ADP
fuelectenerg-900	2	46	belgrade	belgrade	PROPN
fuelectenerg-900	2	47	,	,	PUNCT
fuelectenerg-900	2	48	bulevar	bulevar	PROPN
fuelectenerg-900	2	49	kralja	kralja	NOUN
fuelectenerg-900	2	50	aleksandra	aleksandra	PROPN
fuelectenerg-900	2	51	83	83	NUM
fuelectenerg-900	2	52	,	,	PUNCT
fuelectenerg-900	2	53	11000	11000	NUM
fuelectenerg-900	2	54	belgrade	belgrade	NOUN
fuelectenerg-900	2	55	,	,	PUNCT
fuelectenerg-900	2	56	serbia	serbia	PROPN
fuelectenerg-900	2	57	2	2	NUM
fuelectenerg-900	2	58	institute	institute	NOUN
fuelectenerg-900	2	59	of	of	ADP
fuelectenerg-900	2	60	chemistry	chemistry	NOUN
fuelectenerg-900	2	61	,	,	PUNCT
fuelectenerg-900	2	62	technology	technology	NOUN
fuelectenerg-900	2	63	and	and	CCONJ
fuelectenerg-900	2	64	metallurgy	metallurgy	NOUN
fuelectenerg-900	2	65	center	center	NOUN
fuelectenerg-900	2	66	of	of	ADP
fuelectenerg-900	2	67	microelectronic	microelectronic	ADJ
fuelectenerg-900	2	68	technologies	technology	NOUN
fuelectenerg-900	2	69	,	,	PUNCT
fuelectenerg-900	2	70	university	university	PROPN
fuelectenerg-900	2	71	of	of	ADP
fuelectenerg-900	2	72	belgrade	belgrade	PROPN
fuelectenerg-900	2	73	,	,	PUNCT
fuelectenerg-900	2	74	njegoševa	njegoševa	PROPN
fuelectenerg-900	2	75	12	12	NUM
fuelectenerg-900	2	76	,	,	PUNCT
fuelectenerg-900	2	77	11000	11000	NUM
fuelectenerg-900	2	78	belgrade	belgrade	NOUN
fuelectenerg-900	2	79	,	,	PUNCT
fuelectenerg-900	2	80	serbia	serbia	PROPN
fuelectenerg-900	2	81	3	3	NUM
fuelectenerg-900	2	82	serbian	serbian	PROPN
fuelectenerg-900	2	83	academy	academy	PROPN
fuelectenerg-900	2	84	of	of	ADP
fuelectenerg-900	2	85	sciences	sciences	PROPN
fuelectenerg-900	2	86	and	and	CCONJ
fuelectenerg-900	2	87	arts	art	NOUN
fuelectenerg-900	2	88	,	,	PUNCT
fuelectenerg-900	2	89	institute	institute	NOUN
fuelectenerg-900	2	90	of	of	ADP
fuelectenerg-900	2	91	technical	technical	PROPN
fuelectenerg-900	2	92	sciences	sciences	PROPN
fuelectenerg-900	2	93	sasa	sasa	PROPN
fuelectenerg-900	2	94	,	,	PUNCT
fuelectenerg-900	2	95	knez	knez	PROPN
fuelectenerg-900	2	96	mihailova	mihailova	PROPN
fuelectenerg-900	2	97	35	35	NUM
fuelectenerg-900	2	98	,	,	PUNCT
fuelectenerg-900	2	99	11000	11000	NUM
fuelectenerg-900	2	100	belgrade	belgrade	NOUN
fuelectenerg-900	2	101	,	,	PUNCT
fuelectenerg-900	2	102	serbia	serbia	PROPN
fuelectenerg-900	2	103	4	4	NUM
fuelectenerg-900	2	104	singidunum	singidunum	PROPN
fuelectenerg-900	2	105	university	university	NOUN
fuelectenerg-900	2	106	,	,	PUNCT
fuelectenerg-900	2	107	danijelova	danijelova	NOUN
fuelectenerg-900	2	108	29	29	NUM
fuelectenerg-900	2	109	,	,	PUNCT
fuelectenerg-900	2	110	11000	11000	NUM
fuelectenerg-900	2	111	belgrade	belgrade	NOUN
fuelectenerg-900	2	112	,	,	PUNCT
fuelectenerg-900	2	113	serbia	serbia	PROPN
fuelectenerg-900	2	114	abstract	abstract	ADJ
fuelectenerg-900	2	115	.	.	PUNCT
fuelectenerg-900	3	1	during	during	ADP
fuelectenerg-900	3	2	the	the	DET
fuelectenerg-900	3	3	past	past	ADJ
fuelectenerg-900	3	4	two	two	NUM
fuelectenerg-900	3	5	decades	decade	NOUN
fuelectenerg-900	3	6	a	a	DET
fuelectenerg-900	3	7	considerable	considerable	ADJ
fuelectenerg-900	3	8	effort	effort	NOUN
fuelectenerg-900	3	9	has	have	AUX
fuelectenerg-900	3	10	been	be	AUX
fuelectenerg-900	3	11	made	make	VERB
fuelectenerg-900	3	12	to	to	PART
fuelectenerg-900	3	13	develop	develop	VERB
fuelectenerg-900	3	14	radio	radio	NOUN
fuelectenerg-900	3	15	-	-	PUNCT
fuelectenerg-900	3	16	frequency	frequency	NOUN
fuelectenerg-900	3	17	(	(	PUNCT
fuelectenerg-900	3	18	rf	rf	NOUN
fuelectenerg-900	3	19	)	)	PUNCT
fuelectenerg-900	3	20	resonators	resonator	NOUN
fuelectenerg-900	3	21	which	which	PRON
fuelectenerg-900	3	22	are	be	AUX
fuelectenerg-900	3	23	fabricated	fabricate	VERB
fuelectenerg-900	3	24	using	use	VERB
fuelectenerg-900	3	25	the	the	DET
fuelectenerg-900	3	26	micro	micro	ADJ
fuelectenerg-900	3	27	/	/	PROPN
fuelectenerg-900	3	28	nanoelectromechanical	nanoelectromechanical	ADJ
fuelectenerg-900	3	29	systems	system	NOUN
fuelectenerg-900	3	30	(	(	PUNCT
fuelectenerg-900	3	31	mems	mem	NOUN
fuelectenerg-900	3	32	/	/	SYM
fuelectenerg-900	3	33	nems	nem	NOUN
fuelectenerg-900	3	34	)	)	PUNCT
fuelectenerg-900	3	35	technologies	technology	NOUN
fuelectenerg-900	3	36	,	,	PUNCT
fuelectenerg-900	3	37	in	in	ADP
fuelectenerg-900	3	38	order	order	NOUN
fuelectenerg-900	3	39	to	to	PART
fuelectenerg-900	3	40	replace	replace	VERB
fuelectenerg-900	3	41	conventional	conventional	ADJ
fuelectenerg-900	3	42	large	large	ADJ
fuelectenerg-900	3	43	off	off	ADP
fuelectenerg-900	3	44	-	-	PUNCT
fuelectenerg-900	3	45	chip	chip	NOUN
fuelectenerg-900	3	46	components	component	NOUN
fuelectenerg-900	3	47	in	in	ADP
fuelectenerg-900	3	48	wireless	wireless	ADJ
fuelectenerg-900	3	49	transceivers	transceiver	NOUN
fuelectenerg-900	3	50	and	and	CCONJ
fuelectenerg-900	3	51	other	other	ADJ
fuelectenerg-900	3	52	high	high	ADJ
fuelectenerg-900	3	53	-	-	PUNCT
fuelectenerg-900	3	54	speed	speed	NOUN
fuelectenerg-900	3	55	electronic	electronic	ADJ
fuelectenerg-900	3	56	systems	system	NOUN
fuelectenerg-900	3	57	.	.	PUNCT
fuelectenerg-900	4	1	the	the	DET
fuelectenerg-900	4	2	first	first	ADJ
fuelectenerg-900	4	3	part	part	NOUN
fuelectenerg-900	4	4	of	of	ADP
fuelectenerg-900	4	5	the	the	DET
fuelectenerg-900	4	6	paper	paper	NOUN
fuelectenerg-900	4	7	presents	present	VERB
fuelectenerg-900	4	8	an	an	DET
fuelectenerg-900	4	9	overview	overview	NOUN
fuelectenerg-900	4	10	of	of	ADP
fuelectenerg-900	4	11	rf	rf	NOUN
fuelectenerg-900	4	12	mems	mem	NOUN
fuelectenerg-900	4	13	and	and	CCONJ
fuelectenerg-900	4	14	nems	nem	NOUN
fuelectenerg-900	4	15	resonators	resonator	NOUN
fuelectenerg-900	4	16	,	,	PUNCT
fuelectenerg-900	4	17	including	include	VERB
fuelectenerg-900	4	18	those	those	PRON
fuelectenerg-900	4	19	based	base	VERB
fuelectenerg-900	4	20	on	on	ADP
fuelectenerg-900	4	21	two	two	NUM
fuelectenerg-900	4	22	-	-	PUNCT
fuelectenerg-900	4	23	dimensional	dimensional	ADJ
fuelectenerg-900	4	24	crystals	crystal	NOUN
fuelectenerg-900	4	25	(	(	PUNCT
fuelectenerg-900	4	26	e.g.	e.g.	ADV
fuelectenerg-900	4	27	graphene	graphene	NOUN
fuelectenerg-900	4	28	)	)	PUNCT
fuelectenerg-900	4	29	.	.	PUNCT
fuelectenerg-900	5	1	the	the	DET
fuelectenerg-900	5	2	frequency	frequency	NOUN
fuelectenerg-900	5	3	tuning	tuning	NOUN
fuelectenerg-900	5	4	in	in	ADP
fuelectenerg-900	5	5	mems	mem	NOUN
fuelectenerg-900	5	6	/	/	SYM
fuelectenerg-900	5	7	nems	nem	NOUN
fuelectenerg-900	5	8	resonators	resonator	NOUN
fuelectenerg-900	5	9	is	be	AUX
fuelectenerg-900	5	10	then	then	ADV
fuelectenerg-900	5	11	analyzed	analyze	VERB
fuelectenerg-900	5	12	.	.	PUNCT
fuelectenerg-900	6	1	improvements	improvement	NOUN
fuelectenerg-900	6	2	that	that	PRON
fuelectenerg-900	6	3	would	would	AUX
fuelectenerg-900	6	4	be	be	AUX
fuelectenerg-900	6	5	necessary	necessary	ADJ
fuelectenerg-900	6	6	in	in	ADP
fuelectenerg-900	6	7	order	order	NOUN
fuelectenerg-900	6	8	for	for	SCONJ
fuelectenerg-900	6	9	mems	mem	NOUN
fuelectenerg-900	6	10	/	/	SYM
fuelectenerg-900	6	11	nems	nem	NOUN
fuelectenerg-900	6	12	resonators	resonator	NOUN
fuelectenerg-900	6	13	to	to	PART
fuelectenerg-900	6	14	meet	meet	VERB
fuelectenerg-900	6	15	the	the	DET
fuelectenerg-900	6	16	requirements	requirement	NOUN
fuelectenerg-900	6	17	of	of	ADP
fuelectenerg-900	6	18	wireless	wireless	ADJ
fuelectenerg-900	6	19	systems	system	NOUN
fuelectenerg-900	6	20	are	be	AUX
fuelectenerg-900	6	21	also	also	ADV
fuelectenerg-900	6	22	discussed	discuss	VERB
fuelectenerg-900	6	23	.	.	PUNCT
fuelectenerg-900	7	1	the	the	DET
fuelectenerg-900	7	2	analysis	analysis	NOUN
fuelectenerg-900	7	3	of	of	ADP
fuelectenerg-900	7	4	noise	noise	NOUN
fuelectenerg-900	7	5	of	of	ADP
fuelectenerg-900	7	6	rf	rf	NOUN
fuelectenerg-900	7	7	mems	mem	NOUN
fuelectenerg-900	7	8	/	/	SYM
fuelectenerg-900	7	9	nems	nem	NOUN
fuelectenerg-900	7	10	resonators	resonator	NOUN
fuelectenerg-900	7	11	and	and	CCONJ
fuelectenerg-900	7	12	oscillators	oscillator	NOUN
fuelectenerg-900	7	13	is	be	AUX
fuelectenerg-900	7	14	especially	especially	ADV
fuelectenerg-900	7	15	important	important	ADJ
fuelectenerg-900	7	16	in	in	ADP
fuelectenerg-900	7	17	modern	modern	ADJ
fuelectenerg-900	7	18	wireless	wireless	ADJ
fuelectenerg-900	7	19	communication	communication	NOUN
fuelectenerg-900	7	20	systems	system	NOUN
fuelectenerg-900	7	21	due	due	ADJ
fuelectenerg-900	7	22	to	to	ADP
fuelectenerg-900	7	23	increasingly	increasingly	ADV
fuelectenerg-900	7	24	stringent	stringent	ADJ
fuelectenerg-900	7	25	requirements	requirement	NOUN
fuelectenerg-900	7	26	regarding	regard	VERB
fuelectenerg-900	7	27	the	the	DET
fuelectenerg-900	7	28	acceptable	acceptable	ADJ
fuelectenerg-900	7	29	noise	noise	NOUN
fuelectenerg-900	7	30	level	level	NOUN
fuelectenerg-900	7	31	in	in	ADP
fuelectenerg-900	7	32	every	every	DET
fuelectenerg-900	7	33	next	next	ADJ
fuelectenerg-900	7	34	generation	generation	NOUN
fuelectenerg-900	7	35	.	.	PUNCT
fuelectenerg-900	8	1	the	the	DET
fuelectenerg-900	8	2	second	second	ADJ
fuelectenerg-900	8	3	part	part	NOUN
fuelectenerg-900	8	4	of	of	ADP
fuelectenerg-900	8	5	the	the	DET
fuelectenerg-900	8	6	paper	paper	NOUN
fuelectenerg-900	8	7	presents	present	VERB
fuelectenerg-900	8	8	the	the	DET
fuelectenerg-900	8	9	analysis	analysis	NOUN
fuelectenerg-900	8	10	of	of	ADP
fuelectenerg-900	8	11	adsorption	adsorption	NOUN
fuelectenerg-900	8	12	-	-	PUNCT
fuelectenerg-900	8	13	desorption	desorption	NOUN
fuelectenerg-900	8	14	(	(	PUNCT
fuelectenerg-900	8	15	ad	ad	NOUN
fuelectenerg-900	8	16	)	)	PUNCT
fuelectenerg-900	8	17	noise	noise	NOUN
fuelectenerg-900	8	18	in	in	ADP
fuelectenerg-900	8	19	rf	rf	NOUN
fuelectenerg-900	8	20	mems	mem	NOUN
fuelectenerg-900	8	21	/	/	SYM
fuelectenerg-900	8	22	nems	nem	NOUN
fuelectenerg-900	8	23	resonators	resonator	NOUN
fuelectenerg-900	8	24	,	,	PUNCT
fuelectenerg-900	8	25	which	which	PRON
fuelectenerg-900	8	26	becomes	becomes	AUX
fuelectenerg-900	8	27	pronounced	pronounce	VERB
fuelectenerg-900	8	28	with	with	ADP
fuelectenerg-900	8	29	the	the	DET
fuelectenerg-900	8	30	decrease	decrease	NOUN
fuelectenerg-900	8	31	of	of	ADP
fuelectenerg-900	8	32	components	component	NOUN
fuelectenerg-900	8	33	'	'	PART
fuelectenerg-900	8	34	dimensions	dimension	NOUN
fuelectenerg-900	8	35	,	,	PUNCT
fuelectenerg-900	8	36	and	and	CCONJ
fuelectenerg-900	8	37	is	be	AUX
fuelectenerg-900	8	38	not	not	PART
fuelectenerg-900	8	39	sufficiently	sufficiently	ADV
fuelectenerg-900	8	40	elaborated	elaborate	VERB
fuelectenerg-900	8	41	in	in	ADP
fuelectenerg-900	8	42	the	the	DET
fuelectenerg-900	8	43	existing	exist	VERB
fuelectenerg-900	8	44	literature	literature	NOUN
fuelectenerg-900	8	45	about	about	ADP
fuelectenerg-900	8	46	such	such	ADJ
fuelectenerg-900	8	47	components	component	NOUN
fuelectenerg-900	8	48	.	.	PUNCT
fuelectenerg-900	9	1	finally	finally	ADV
fuelectenerg-900	9	2	,	,	PUNCT
fuelectenerg-900	9	3	a	a	DET
fuelectenerg-900	9	4	theoretical	theoretical	ADJ
fuelectenerg-900	9	5	model	model	NOUN
fuelectenerg-900	9	6	of	of	ADP
fuelectenerg-900	9	7	phase	phase	NOUN
fuelectenerg-900	9	8	noise	noise	NOUN
fuelectenerg-900	9	9	in	in	ADP
fuelectenerg-900	9	10	rf	rf	NOUN
fuelectenerg-900	9	11	mems	mem	NOUN
fuelectenerg-900	9	12	/	/	SYM
fuelectenerg-900	9	13	nems	nem	NOUN
fuelectenerg-900	9	14	oscillators	oscillator	NOUN
fuelectenerg-900	9	15	will	will	AUX
fuelectenerg-900	9	16	be	be	AUX
fuelectenerg-900	9	17	presented	present	VERB
fuelectenerg-900	9	18	,	,	PUNCT
fuelectenerg-900	9	19	with	with	ADP
fuelectenerg-900	9	20	a	a	DET
fuelectenerg-900	9	21	special	special	ADJ
fuelectenerg-900	9	22	emphasize	emphasize	NOUN
fuelectenerg-900	9	23	on	on	ADP
fuelectenerg-900	9	24	the	the	DET
fuelectenerg-900	9	25	influence	influence	NOUN
fuelectenerg-900	9	26	of	of	ADP
fuelectenerg-900	9	27	the	the	DET
fuelectenerg-900	9	28	resonator	resonator	NOUN
fuelectenerg-900	9	29	ad	ad	NOUN
fuelectenerg-900	9	30	noise	noise	NOUN
fuelectenerg-900	9	31	on	on	ADP
fuelectenerg-900	9	32	the	the	DET
fuelectenerg-900	9	33	oscillator	oscillator	NOUN
fuelectenerg-900	9	34	phase	phase	NOUN
fuelectenerg-900	9	35	noise	noise	NOUN
fuelectenerg-900	9	36	.	.	PUNCT
fuelectenerg-900	10	1	key	key	ADJ
fuelectenerg-900	10	2	words	word	NOUN
fuelectenerg-900	10	3	:	:	PUNCT
fuelectenerg-900	10	4	mems	mem	NOUN
fuelectenerg-900	10	5	resonator	resonator	NOUN
fuelectenerg-900	10	6	,	,	PUNCT
fuelectenerg-900	10	7	nems	nem	NOUN
fuelectenerg-900	10	8	resonator	resonator	NOUN
fuelectenerg-900	10	9	,	,	PUNCT
fuelectenerg-900	10	10	tunable	tunable	ADJ
fuelectenerg-900	10	11	resonator	resonator	NOUN
fuelectenerg-900	10	12	,	,	PUNCT
fuelectenerg-900	10	13	graphene	graphene	NOUN
fuelectenerg-900	10	14	resonator	resonator	NOUN
fuelectenerg-900	10	15	,	,	PUNCT
fuelectenerg-900	10	16	adsorption	adsorption	NOUN
fuelectenerg-900	10	17	-	-	PUNCT
fuelectenerg-900	10	18	desorption	desorption	NOUN
fuelectenerg-900	10	19	noise	noise	NOUN
fuelectenerg-900	10	20	,	,	PUNCT
fuelectenerg-900	10	21	oscillator	oscillator	NOUN
fuelectenerg-900	10	22	phase	phase	NOUN
fuelectenerg-900	10	23	noise	noise	NOUN
fuelectenerg-900	10	24	received	receive	VERB
fuelectenerg-900	10	25	march	march	PROPN
fuelectenerg-900	10	26	2	2	NUM
fuelectenerg-900	10	27	,	,	PUNCT
fuelectenerg-900	10	28	2015	2015	NUM
fuelectenerg-900	10	29	corresponding	correspond	VERB
fuelectenerg-900	10	30	author	author	NOUN
fuelectenerg-900	10	31	:	:	PUNCT
fuelectenerg-900	10	32	zoran	zoran	PROPN
fuelectenerg-900	10	33	djurić	djurić	VERB
fuelectenerg-900	10	34	serbian	serbian	PROPN
fuelectenerg-900	10	35	academy	academy	PROPN
fuelectenerg-900	10	36	of	of	ADP
fuelectenerg-900	10	37	sciences	sciences	PROPN
fuelectenerg-900	10	38	and	and	CCONJ
fuelectenerg-900	10	39	arts	art	NOUN
fuelectenerg-900	10	40	,	,	PUNCT
fuelectenerg-900	10	41	institute	institute	NOUN
fuelectenerg-900	10	42	of	of	ADP
fuelectenerg-900	10	43	technical	technical	PROPN
fuelectenerg-900	10	44	sciences	sciences	PROPN
fuelectenerg-900	10	45	sasa	sasa	PROPN
fuelectenerg-900	10	46	,	,	PUNCT
fuelectenerg-900	10	47	knez	knez	PROPN
fuelectenerg-900	10	48	mihailova	mihailova	PROPN
fuelectenerg-900	10	49	35	35	NUM
fuelectenerg-900	10	50	,	,	PUNCT
fuelectenerg-900	10	51	11000	11000	NUM
fuelectenerg-900	10	52	belgrade	belgrade	NOUN
fuelectenerg-900	10	53	,	,	PUNCT
fuelectenerg-900	10	54	serbia	serbia	PROPN
fuelectenerg-900	10	55	(	(	PUNCT
fuelectenerg-900	10	56	e	e	NOUN
fuelectenerg-900	10	57	-	-	NOUN
fuelectenerg-900	10	58	mail	mail	NOUN
fuelectenerg-900	10	59	:	:	PUNCT
fuelectenerg-900	10	60	zoran.djuric@itn.sanu.ac.rs	zoran.djuric@itn.sanu.ac.rs	NUM
fuelectenerg-900	10	61	)	)	PUNCT
fuelectenerg-900	10	62	346	346	NUM
fuelectenerg-900	10	63	i.	i.	NOUN
fuelectenerg-900	10	64	jokić	jokić	PROPN
fuelectenerg-900	10	65	,	,	PUNCT
fuelectenerg-900	10	66	m.	m.	NOUN
fuelectenerg-900	10	67	frantlović	frantlović	NOUN
fuelectenerg-900	10	68	,	,	PUNCT
fuelectenerg-900	10	69	z.	z.	PROPN
fuelectenerg-900	10	70	djurić	djurić	PROPN
fuelectenerg-900	10	71	,	,	PUNCT
fuelectenerg-900	10	72	m.	m.	NOUN
fuelectenerg-900	10	73	l.	l.	PROPN
fuelectenerg-900	10	74	dukić	dukić	PROPN
fuelectenerg-900	10	75	1	1	NUM
fuelectenerg-900	10	76	.	.	PUNCT
fuelectenerg-900	10	77	introduction	introduction	NOUN
fuelectenerg-900	10	78	over	over	ADP
fuelectenerg-900	10	79	the	the	DET
fuelectenerg-900	10	80	past	past	ADJ
fuelectenerg-900	10	81	two	two	NUM
fuelectenerg-900	10	82	decades	decade	NOUN
fuelectenerg-900	10	83	,	,	PUNCT
fuelectenerg-900	10	84	wireless	wireless	ADJ
fuelectenerg-900	10	85	communications	communication	NOUN
fuelectenerg-900	10	86	have	have	AUX
fuelectenerg-900	10	87	been	be	AUX
fuelectenerg-900	10	88	a	a	DET
fuelectenerg-900	10	89	subject	subject	NOUN
fuelectenerg-900	10	90	of	of	ADP
fuelectenerg-900	10	91	intensive	intensive	ADJ
fuelectenerg-900	10	92	development	development	NOUN
fuelectenerg-900	10	93	,	,	PUNCT
fuelectenerg-900	10	94	and	and	CCONJ
fuelectenerg-900	10	95	tremendous	tremendous	ADJ
fuelectenerg-900	10	96	growth	growth	NOUN
fuelectenerg-900	10	97	has	have	AUX
fuelectenerg-900	10	98	taken	take	VERB
fuelectenerg-900	10	99	place	place	NOUN
fuelectenerg-900	10	100	in	in	ADP
fuelectenerg-900	10	101	this	this	DET
fuelectenerg-900	10	102	area	area	NOUN
fuelectenerg-900	10	103	of	of	ADP
fuelectenerg-900	10	104	technology	technology	NOUN
fuelectenerg-900	10	105	and	and	CCONJ
fuelectenerg-900	10	106	industry	industry	NOUN
fuelectenerg-900	10	107	.	.	PUNCT
fuelectenerg-900	11	1	modern	modern	ADJ
fuelectenerg-900	11	2	wireless	wireless	ADJ
fuelectenerg-900	11	3	terminals	terminal	NOUN
fuelectenerg-900	11	4	have	have	AUX
fuelectenerg-900	11	5	become	become	VERB
fuelectenerg-900	11	6	universal	universal	ADJ
fuelectenerg-900	11	7	mobile	mobile	ADJ
fuelectenerg-900	11	8	personal	personal	ADJ
fuelectenerg-900	11	9	devices	device	NOUN
fuelectenerg-900	11	10	which	which	PRON
fuelectenerg-900	11	11	unite	unite	VERB
fuelectenerg-900	11	12	the	the	DET
fuelectenerg-900	11	13	functions	function	NOUN
fuelectenerg-900	11	14	of	of	ADP
fuelectenerg-900	11	15	a	a	DET
fuelectenerg-900	11	16	telephone	telephone	NOUN
fuelectenerg-900	11	17	,	,	PUNCT
fuelectenerg-900	11	18	a	a	DET
fuelectenerg-900	11	19	computer	computer	NOUN
fuelectenerg-900	11	20	with	with	ADP
fuelectenerg-900	11	21	internet	internet	NOUN
fuelectenerg-900	11	22	access	access	NOUN
fuelectenerg-900	11	23	,	,	PUNCT
fuelectenerg-900	11	24	a	a	DET
fuelectenerg-900	11	25	radio	radio	NOUN
fuelectenerg-900	11	26	navigational	navigational	ADJ
fuelectenerg-900	11	27	device	device	NOUN
fuelectenerg-900	11	28	,	,	PUNCT
fuelectenerg-900	11	29	a	a	DET
fuelectenerg-900	11	30	multimedia	multimedia	NOUN
fuelectenerg-900	11	31	center	center	NOUN
fuelectenerg-900	11	32	etc	etc	X
fuelectenerg-900	11	33	.	.	X
fuelectenerg-900	11	34	,	,	PUNCT
fuelectenerg-900	11	35	and	and	CCONJ
fuelectenerg-900	11	36	in	in	ADP
fuelectenerg-900	11	37	every	every	DET
fuelectenerg-900	11	38	new	new	ADJ
fuelectenerg-900	11	39	generation	generation	NOUN
fuelectenerg-900	11	40	operate	operate	VERB
fuelectenerg-900	11	41	in	in	ADP
fuelectenerg-900	11	42	a	a	DET
fuelectenerg-900	11	43	greater	great	ADJ
fuelectenerg-900	11	44	number	number	NOUN
fuelectenerg-900	11	45	of	of	ADP
fuelectenerg-900	11	46	frequency	frequency	NOUN
fuelectenerg-900	11	47	ranges	range	NOUN
fuelectenerg-900	11	48	(	(	PUNCT
fuelectenerg-900	11	49	multiband	multiband	NOUN
fuelectenerg-900	11	50	operation	operation	NOUN
fuelectenerg-900	11	51	)	)	PUNCT
fuelectenerg-900	11	52	and	and	CCONJ
fuelectenerg-900	11	53	according	accord	VERB
fuelectenerg-900	11	54	to	to	ADP
fuelectenerg-900	11	55	a	a	DET
fuelectenerg-900	11	56	greater	great	ADJ
fuelectenerg-900	11	57	number	number	NOUN
fuelectenerg-900	11	58	of	of	ADP
fuelectenerg-900	11	59	communication	communication	NOUN
fuelectenerg-900	11	60	standards	standard	NOUN
fuelectenerg-900	11	61	(	(	PUNCT
fuelectenerg-900	11	62	multistandard	multistandard	NOUN
fuelectenerg-900	11	63	operation	operation	NOUN
fuelectenerg-900	11	64	)	)	PUNCT
fuelectenerg-900	11	65	.	.	PUNCT
fuelectenerg-900	12	1	this	this	DET
fuelectenerg-900	12	2	course	course	NOUN
fuelectenerg-900	12	3	of	of	ADP
fuelectenerg-900	12	4	development	development	NOUN
fuelectenerg-900	12	5	poses	pose	VERB
fuelectenerg-900	12	6	new	new	ADJ
fuelectenerg-900	12	7	challenges	challenge	NOUN
fuelectenerg-900	12	8	related	relate	VERB
fuelectenerg-900	12	9	to	to	ADP
fuelectenerg-900	12	10	the	the	DET
fuelectenerg-900	12	11	design	design	NOUN
fuelectenerg-900	12	12	of	of	ADP
fuelectenerg-900	12	13	these	these	DET
fuelectenerg-900	12	14	devices	device	NOUN
fuelectenerg-900	12	15	'	'	PART
fuelectenerg-900	12	16	transceivers	transceiver	NOUN
fuelectenerg-900	12	17	.	.	PUNCT
fuelectenerg-900	13	1	having	have	VERB
fuelectenerg-900	13	2	in	in	ADP
fuelectenerg-900	13	3	mind	mind	NOUN
fuelectenerg-900	13	4	the	the	DET
fuelectenerg-900	13	5	requirements	requirement	NOUN
fuelectenerg-900	13	6	for	for	ADP
fuelectenerg-900	13	7	a	a	DET
fuelectenerg-900	13	8	small	small	ADJ
fuelectenerg-900	13	9	size	size	NOUN
fuelectenerg-900	13	10	,	,	PUNCT
fuelectenerg-900	13	11	low	low	ADJ
fuelectenerg-900	13	12	power	power	NOUN
fuelectenerg-900	13	13	consumption	consumption	NOUN
fuelectenerg-900	13	14	and	and	CCONJ
fuelectenerg-900	13	15	low	low	ADJ
fuelectenerg-900	13	16	cost	cost	NOUN
fuelectenerg-900	13	17	of	of	ADP
fuelectenerg-900	13	18	mobile	mobile	ADJ
fuelectenerg-900	13	19	terminals	terminal	NOUN
fuelectenerg-900	13	20	,	,	PUNCT
fuelectenerg-900	13	21	it	it	PRON
fuelectenerg-900	13	22	is	be	AUX
fuelectenerg-900	13	23	apparent	apparent	ADJ
fuelectenerg-900	13	24	that	that	SCONJ
fuelectenerg-900	13	25	the	the	DET
fuelectenerg-900	13	26	multiband	multiband	NOUN
fuelectenerg-900	13	27	multistandard	multistandard	VERB
fuelectenerg-900	13	28	front	front	ADJ
fuelectenerg-900	13	29	end	end	NOUN
fuelectenerg-900	13	30	,	,	PUNCT
fuelectenerg-900	13	31	i.e.	i.e.	X
fuelectenerg-900	13	32	the	the	DET
fuelectenerg-900	13	33	transceiver	transceiver	NOUN
fuelectenerg-900	13	34	part	part	NOUN
fuelectenerg-900	13	35	in	in	ADP
fuelectenerg-900	13	36	which	which	PRON
fuelectenerg-900	13	37	the	the	DET
fuelectenerg-900	13	38	processing	processing	NOUN
fuelectenerg-900	13	39	of	of	ADP
fuelectenerg-900	13	40	high	high	ADJ
fuelectenerg-900	13	41	frequency	frequency	NOUN
fuelectenerg-900	13	42	signals	signal	NOUN
fuelectenerg-900	13	43	is	be	AUX
fuelectenerg-900	13	44	performed	perform	VERB
fuelectenerg-900	13	45	,	,	PUNCT
fuelectenerg-900	13	46	is	be	AUX
fuelectenerg-900	13	47	the	the	DET
fuelectenerg-900	13	48	most	most	ADV
fuelectenerg-900	13	49	critical	critical	ADJ
fuelectenerg-900	13	50	.	.	PUNCT
fuelectenerg-900	14	1	in	in	ADP
fuelectenerg-900	14	2	transceivers	transceiver	NOUN
fuelectenerg-900	14	3	operating	operate	VERB
fuelectenerg-900	14	4	at	at	ADP
fuelectenerg-900	14	5	frequencies	frequency	NOUN
fuelectenerg-900	14	6	around	around	ADP
fuelectenerg-900	14	7	1	1	NUM
fuelectenerg-900	14	8	ghz	ghz	NOUN
fuelectenerg-900	14	9	and	and	CCONJ
fuelectenerg-900	14	10	higher	high	ADJ
fuelectenerg-900	14	11	,	,	PUNCT
fuelectenerg-900	14	12	which	which	PRON
fuelectenerg-900	14	13	is	be	AUX
fuelectenerg-900	14	14	common	common	ADJ
fuelectenerg-900	14	15	in	in	ADP
fuelectenerg-900	14	16	modern	modern	ADJ
fuelectenerg-900	14	17	mobile	mobile	ADJ
fuelectenerg-900	14	18	personal	personal	ADJ
fuelectenerg-900	14	19	devices	device	NOUN
fuelectenerg-900	14	20	,	,	PUNCT
fuelectenerg-900	14	21	it	it	PRON
fuelectenerg-900	14	22	is	be	AUX
fuelectenerg-900	14	23	still	still	ADV
fuelectenerg-900	14	24	not	not	PART
fuelectenerg-900	14	25	technologically	technologically	ADV
fuelectenerg-900	14	26	possible	possible	ADJ
fuelectenerg-900	14	27	to	to	PART
fuelectenerg-900	14	28	ensure	ensure	VERB
fuelectenerg-900	14	29	entirely	entirely	ADV
fuelectenerg-900	14	30	software	software	NOUN
fuelectenerg-900	14	31	-	-	PUNCT
fuelectenerg-900	14	32	based	base	VERB
fuelectenerg-900	14	33	adaptation	adaptation	NOUN
fuelectenerg-900	14	34	to	to	ADP
fuelectenerg-900	14	35	an	an	DET
fuelectenerg-900	14	36	arbitrary	arbitrary	ADJ
fuelectenerg-900	14	37	communication	communication	NOUN
fuelectenerg-900	14	38	standard	standard	NOUN
fuelectenerg-900	14	39	.	.	PUNCT
fuelectenerg-900	15	1	the	the	DET
fuelectenerg-900	15	2	processing	processing	NOUN
fuelectenerg-900	15	3	of	of	ADP
fuelectenerg-900	15	4	signals	signal	NOUN
fuelectenerg-900	15	5	at	at	ADP
fuelectenerg-900	15	6	those	those	DET
fuelectenerg-900	15	7	frequencies	frequency	NOUN
fuelectenerg-900	15	8	(	(	PUNCT
fuelectenerg-900	15	9	filtering	filtering	NOUN
fuelectenerg-900	15	10	,	,	PUNCT
fuelectenerg-900	15	11	amplification	amplification	NOUN
fuelectenerg-900	15	12	,	,	PUNCT
fuelectenerg-900	15	13	frequency	frequency	NOUN
fuelectenerg-900	15	14	conversion	conversion	NOUN
fuelectenerg-900	15	15	)	)	PUNCT
fuelectenerg-900	15	16	is	be	AUX
fuelectenerg-900	15	17	performed	perform	VERB
fuelectenerg-900	15	18	by	by	ADP
fuelectenerg-900	15	19	analog	analog	NOUN
fuelectenerg-900	15	20	circuits	circuit	NOUN
fuelectenerg-900	15	21	,	,	PUNCT
fuelectenerg-900	15	22	and	and	CCONJ
fuelectenerg-900	15	23	it	it	PRON
fuelectenerg-900	15	24	often	often	ADV
fuelectenerg-900	15	25	requires	require	VERB
fuelectenerg-900	15	26	the	the	DET
fuelectenerg-900	15	27	implementation	implementation	NOUN
fuelectenerg-900	15	28	of	of	ADP
fuelectenerg-900	15	29	off	off	ADP
fuelectenerg-900	15	30	-	-	PUNCT
fuelectenerg-900	15	31	chip	chip	NOUN
fuelectenerg-900	15	32	(	(	PUNCT
fuelectenerg-900	15	33	discrete	discrete	ADJ
fuelectenerg-900	15	34	)	)	PUNCT
fuelectenerg-900	15	35	passive	passive	ADJ
fuelectenerg-900	15	36	components	component	NOUN
fuelectenerg-900	15	37	and	and	CCONJ
fuelectenerg-900	15	38	several	several	ADJ
fuelectenerg-900	15	39	separate	separate	ADJ
fuelectenerg-900	15	40	integrated	integrated	ADJ
fuelectenerg-900	15	41	circuits	circuit	NOUN
fuelectenerg-900	15	42	(	(	PUNCT
fuelectenerg-900	15	43	ic	ic	NUM
fuelectenerg-900	15	44	)	)	PUNCT
fuelectenerg-900	15	45	,	,	PUNCT
fuelectenerg-900	15	46	because	because	SCONJ
fuelectenerg-900	15	47	the	the	DET
fuelectenerg-900	15	48	performance	performance	NOUN
fuelectenerg-900	15	49	of	of	ADP
fuelectenerg-900	15	50	the	the	DET
fuelectenerg-900	15	51	corresponding	corresponding	ADJ
fuelectenerg-900	15	52	integrated	integrate	VERB
fuelectenerg-900	15	53	components	component	NOUN
fuelectenerg-900	15	54	and	and	CCONJ
fuelectenerg-900	15	55	circuits	circuit	NOUN
fuelectenerg-900	15	56	implemented	implement	VERB
fuelectenerg-900	15	57	in	in	ADP
fuelectenerg-900	15	58	cmos	cmos	PROPN
fuelectenerg-900	15	59	technology	technology	NOUN
fuelectenerg-900	15	60	are	be	AUX
fuelectenerg-900	15	61	not	not	PART
fuelectenerg-900	15	62	satisfactory	satisfactory	ADJ
fuelectenerg-900	15	63	.	.	PUNCT
fuelectenerg-900	16	1	bearing	bear	VERB
fuelectenerg-900	16	2	in	in	ADP
fuelectenerg-900	16	3	mind	mind	NOUN
fuelectenerg-900	16	4	the	the	DET
fuelectenerg-900	16	5	trend	trend	NOUN
fuelectenerg-900	16	6	towards	towards	ADP
fuelectenerg-900	16	7	an	an	DET
fuelectenerg-900	16	8	increasing	increase	VERB
fuelectenerg-900	16	9	number	number	NOUN
fuelectenerg-900	16	10	of	of	ADP
fuelectenerg-900	16	11	frequency	frequency	NOUN
fuelectenerg-900	16	12	bands	band	NOUN
fuelectenerg-900	16	13	in	in	ADP
fuelectenerg-900	16	14	which	which	PRON
fuelectenerg-900	16	15	a	a	DET
fuelectenerg-900	16	16	mobile	mobile	ADJ
fuelectenerg-900	16	17	terminal	terminal	NOUN
fuelectenerg-900	16	18	is	be	AUX
fuelectenerg-900	16	19	used	use	VERB
fuelectenerg-900	16	20	,	,	PUNCT
fuelectenerg-900	16	21	the	the	DET
fuelectenerg-900	16	22	current	current	ADJ
fuelectenerg-900	16	23	approach	approach	NOUN
fuelectenerg-900	16	24	towards	towards	ADP
fuelectenerg-900	16	25	designing	design	VERB
fuelectenerg-900	16	26	multiband	multiband	NOUN
fuelectenerg-900	16	27	multistandard	multistandard	NOUN
fuelectenerg-900	16	28	transceivers	transceiver	NOUN
fuelectenerg-900	16	29	,	,	PUNCT
fuelectenerg-900	16	30	which	which	PRON
fuelectenerg-900	16	31	implies	imply	VERB
fuelectenerg-900	16	32	the	the	DET
fuelectenerg-900	16	33	introduction	introduction	NOUN
fuelectenerg-900	16	34	of	of	ADP
fuelectenerg-900	16	35	an	an	DET
fuelectenerg-900	16	36	additional	additional	ADJ
fuelectenerg-900	16	37	set	set	NOUN
fuelectenerg-900	16	38	of	of	ADP
fuelectenerg-900	16	39	rf	rf	NOUN
fuelectenerg-900	16	40	analog	analog	NOUN
fuelectenerg-900	16	41	circuits	circuit	NOUN
fuelectenerg-900	16	42	and	and	CCONJ
fuelectenerg-900	16	43	off	off	ADP
fuelectenerg-900	16	44	-	-	PUNCT
fuelectenerg-900	16	45	chip	chip	NOUN
fuelectenerg-900	16	46	passive	passive	ADJ
fuelectenerg-900	16	47	components	component	NOUN
fuelectenerg-900	16	48	for	for	ADP
fuelectenerg-900	16	49	each	each	DET
fuelectenerg-900	16	50	new	new	ADJ
fuelectenerg-900	16	51	band	band	NOUN
fuelectenerg-900	16	52	and	and	CCONJ
fuelectenerg-900	16	53	wireless	wireless	NOUN
fuelectenerg-900	16	54	standard	standard	NOUN
fuelectenerg-900	16	55	,	,	PUNCT
fuelectenerg-900	16	56	is	be	AUX
fuelectenerg-900	16	57	becoming	become	VERB
fuelectenerg-900	16	58	inefficient	inefficient	ADJ
fuelectenerg-900	16	59	because	because	SCONJ
fuelectenerg-900	16	60	it	it	PRON
fuelectenerg-900	16	61	leads	lead	VERB
fuelectenerg-900	16	62	to	to	ADP
fuelectenerg-900	16	63	an	an	DET
fuelectenerg-900	16	64	unacceptable	unacceptable	ADJ
fuelectenerg-900	16	65	increase	increase	NOUN
fuelectenerg-900	16	66	in	in	ADP
fuelectenerg-900	16	67	complexity	complexity	NOUN
fuelectenerg-900	16	68	,	,	PUNCT
fuelectenerg-900	16	69	power	power	NOUN
fuelectenerg-900	16	70	consumption	consumption	NOUN
fuelectenerg-900	16	71	,	,	PUNCT
fuelectenerg-900	16	72	size	size	NOUN
fuelectenerg-900	16	73	and	and	CCONJ
fuelectenerg-900	16	74	price	price	NOUN
fuelectenerg-900	16	75	.	.	PUNCT
fuelectenerg-900	17	1	particularly	particularly	ADV
fuelectenerg-900	17	2	critical	critical	ADJ
fuelectenerg-900	17	3	is	be	AUX
fuelectenerg-900	17	4	the	the	DET
fuelectenerg-900	17	5	increase	increase	NOUN
fuelectenerg-900	17	6	in	in	ADP
fuelectenerg-900	17	7	the	the	DET
fuelectenerg-900	17	8	number	number	NOUN
fuelectenerg-900	17	9	of	of	ADP
fuelectenerg-900	17	10	off	off	ADP
fuelectenerg-900	17	11	-	-	PUNCT
fuelectenerg-900	17	12	chip	chip	NOUN
fuelectenerg-900	17	13	passive	passive	ADJ
fuelectenerg-900	17	14	rf	rf	ADJ
fuelectenerg-900	17	15	components	component	NOUN
fuelectenerg-900	17	16	.	.	PUNCT
fuelectenerg-900	18	1	in	in	ADP
fuelectenerg-900	18	2	the	the	DET
fuelectenerg-900	18	3	next	next	ADJ
fuelectenerg-900	18	4	generation	generation	NOUN
fuelectenerg-900	18	5	of	of	ADP
fuelectenerg-900	18	6	mobile	mobile	ADJ
fuelectenerg-900	18	7	terminals	terminal	NOUN
fuelectenerg-900	18	8	,	,	PUNCT
fuelectenerg-900	18	9	the	the	DET
fuelectenerg-900	18	10	reconfigurability	reconfigurability	NOUN
fuelectenerg-900	18	11	of	of	ADP
fuelectenerg-900	18	12	the	the	DET
fuelectenerg-900	18	13	rf	rf	ADJ
fuelectenerg-900	18	14	part	part	NOUN
fuelectenerg-900	18	15	of	of	ADP
fuelectenerg-900	18	16	transceivers	transceiver	NOUN
fuelectenerg-900	18	17	should	should	AUX
fuelectenerg-900	18	18	be	be	AUX
fuelectenerg-900	18	19	achieved	achieve	VERB
fuelectenerg-900	18	20	by	by	ADP
fuelectenerg-900	18	21	using	use	VERB
fuelectenerg-900	18	22	as	as	ADV
fuelectenerg-900	18	23	small	small	ADJ
fuelectenerg-900	18	24	a	a	DET
fuelectenerg-900	18	25	number	number	NOUN
fuelectenerg-900	18	26	of	of	ADP
fuelectenerg-900	18	27	components	component	NOUN
fuelectenerg-900	18	28	as	as	ADP
fuelectenerg-900	18	29	possible	possible	ADJ
fuelectenerg-900	18	30	,	,	PUNCT
fuelectenerg-900	18	31	with	with	ADP
fuelectenerg-900	18	32	the	the	DET
fuelectenerg-900	18	33	simultaneous	simultaneous	ADJ
fuelectenerg-900	18	34	increase	increase	NOUN
fuelectenerg-900	18	35	in	in	ADP
fuelectenerg-900	18	36	the	the	DET
fuelectenerg-900	18	37	integration	integration	NOUN
fuelectenerg-900	18	38	level	level	NOUN
fuelectenerg-900	18	39	:	:	PUNCT
fuelectenerg-900	18	40	by	by	ADP
fuelectenerg-900	18	41	replacing	replace	VERB
fuelectenerg-900	18	42	the	the	DET
fuelectenerg-900	18	43	discrete	discrete	ADJ
fuelectenerg-900	18	44	passive	passive	ADJ
fuelectenerg-900	18	45	components	component	NOUN
fuelectenerg-900	18	46	(	(	PUNCT
fuelectenerg-900	18	47	such	such	ADJ
fuelectenerg-900	18	48	as	as	ADP
fuelectenerg-900	18	49	rf	rf	ADJ
fuelectenerg-900	18	50	filters	filter	NOUN
fuelectenerg-900	18	51	,	,	PUNCT
fuelectenerg-900	18	52	duplexers	duplexer	NOUN
fuelectenerg-900	18	53	,	,	PUNCT
fuelectenerg-900	18	54	switches	switch	NOUN
fuelectenerg-900	18	55	,	,	PUNCT
fuelectenerg-900	18	56	impedance	impedance	NOUN
fuelectenerg-900	18	57	matching	matching	NOUN
fuelectenerg-900	18	58	circuits	circuit	NOUN
fuelectenerg-900	18	59	,	,	PUNCT
fuelectenerg-900	18	60	resonators	resonator	NOUN
fuelectenerg-900	18	61	in	in	ADP
fuelectenerg-900	18	62	frequency	frequency	NOUN
fuelectenerg-900	18	63	references	reference	NOUN
fuelectenerg-900	18	64	and	and	CCONJ
fuelectenerg-900	18	65	frequency	frequency	NOUN
fuelectenerg-900	18	66	synthesizers	synthesizer	NOUN
fuelectenerg-900	18	67	,	,	PUNCT
fuelectenerg-900	18	68	etc	etc	X
fuelectenerg-900	18	69	.	.	X
fuelectenerg-900	18	70	)	)	PUNCT
fuelectenerg-900	18	71	with	with	ADP
fuelectenerg-900	18	72	integrated	integrated	ADJ
fuelectenerg-900	18	73	ones	one	NOUN
fuelectenerg-900	18	74	,	,	PUNCT
fuelectenerg-900	18	75	by	by	ADP
fuelectenerg-900	18	76	introducing	introduce	VERB
fuelectenerg-900	18	77	components	component	NOUN
fuelectenerg-900	18	78	with	with	ADP
fuelectenerg-900	18	79	tunable	tunable	ADJ
fuelectenerg-900	18	80	parameters	parameter	NOUN
fuelectenerg-900	18	81	instead	instead	ADV
fuelectenerg-900	18	82	of	of	ADP
fuelectenerg-900	18	83	a	a	DET
fuelectenerg-900	18	84	number	number	NOUN
fuelectenerg-900	18	85	of	of	ADP
fuelectenerg-900	18	86	discrete	discrete	ADJ
fuelectenerg-900	18	87	ones	one	NOUN
fuelectenerg-900	18	88	with	with	ADP
fuelectenerg-900	18	89	fixed	fix	VERB
fuelectenerg-900	18	90	parameters	parameter	NOUN
fuelectenerg-900	18	91	;	;	PUNCT
fuelectenerg-900	18	92	the	the	DET
fuelectenerg-900	18	93	most	most	ADV
fuelectenerg-900	18	94	desirable	desirable	ADJ
fuelectenerg-900	18	95	solution	solution	NOUN
fuelectenerg-900	18	96	implies	imply	VERB
fuelectenerg-900	18	97	the	the	DET
fuelectenerg-900	18	98	application	application	NOUN
fuelectenerg-900	18	99	of	of	ADP
fuelectenerg-900	18	100	integrated	integrated	ADJ
fuelectenerg-900	18	101	tunable	tunable	NOUN
fuelectenerg-900	18	102	(	(	PUNCT
fuelectenerg-900	18	103	reconfigurable	reconfigurable	NOUN
fuelectenerg-900	18	104	)	)	PUNCT
fuelectenerg-900	18	105	passive	passive	ADJ
fuelectenerg-900	18	106	components	component	NOUN
fuelectenerg-900	18	107	.	.	PUNCT
fuelectenerg-900	19	1	however	however	ADV
fuelectenerg-900	19	2	,	,	PUNCT
fuelectenerg-900	19	3	in	in	ADP
fuelectenerg-900	19	4	this	this	DET
fuelectenerg-900	19	5	regard	regard	NOUN
fuelectenerg-900	19	6	,	,	PUNCT
fuelectenerg-900	19	7	the	the	DET
fuelectenerg-900	19	8	possibilities	possibility	NOUN
fuelectenerg-900	19	9	of	of	ADP
fuelectenerg-900	19	10	conventional	conventional	ADJ
fuelectenerg-900	19	11	technologies	technology	NOUN
fuelectenerg-900	19	12	are	be	AUX
fuelectenerg-900	19	13	limited	limited	ADJ
fuelectenerg-900	19	14	.	.	PUNCT
fuelectenerg-900	20	1	the	the	DET
fuelectenerg-900	20	2	requirements	requirement	NOUN
fuelectenerg-900	20	3	for	for	ADP
fuelectenerg-900	20	4	the	the	DET
fuelectenerg-900	20	5	reconfigurability	reconfigurability	NOUN
fuelectenerg-900	20	6	of	of	ADP
fuelectenerg-900	20	7	the	the	DET
fuelectenerg-900	20	8	rf	rf	ADJ
fuelectenerg-900	20	9	front	front	ADJ
fuelectenerg-900	20	10	-	-	PUNCT
fuelectenerg-900	20	11	end	end	NOUN
fuelectenerg-900	20	12	,	,	PUNCT
fuelectenerg-900	20	13	better	well	ADJ
fuelectenerg-900	20	14	rf	rf	NOUN
fuelectenerg-900	20	15	performance	performance	NOUN
fuelectenerg-900	20	16	and	and	CCONJ
fuelectenerg-900	20	17	a	a	DET
fuelectenerg-900	20	18	higher	high	ADJ
fuelectenerg-900	20	19	level	level	NOUN
fuelectenerg-900	20	20	of	of	ADP
fuelectenerg-900	20	21	integration	integration	NOUN
fuelectenerg-900	20	22	of	of	ADP
fuelectenerg-900	20	23	the	the	DET
fuelectenerg-900	20	24	rf	rf	ADJ
fuelectenerg-900	20	25	segment	segment	NOUN
fuelectenerg-900	20	26	of	of	ADP
fuelectenerg-900	20	27	the	the	DET
fuelectenerg-900	20	28	transceiver	transceiver	NOUN
fuelectenerg-900	20	29	in	in	ADP
fuelectenerg-900	20	30	future	future	ADJ
fuelectenerg-900	20	31	systems	system	NOUN
fuelectenerg-900	20	32	generate	generate	VERB
fuelectenerg-900	20	33	the	the	DET
fuelectenerg-900	20	34	need	need	NOUN
fuelectenerg-900	20	35	for	for	ADP
fuelectenerg-900	20	36	high	high	ADJ
fuelectenerg-900	20	37	-	-	PUNCT
fuelectenerg-900	20	38	quality	quality	NOUN
fuelectenerg-900	20	39	passive	passive	ADJ
fuelectenerg-900	20	40	rf	rf	ADJ
fuelectenerg-900	20	41	components	component	NOUN
fuelectenerg-900	20	42	,	,	PUNCT
fuelectenerg-900	20	43	applicable	applicable	ADJ
fuelectenerg-900	20	44	in	in	ADP
fuelectenerg-900	20	45	a	a	DET
fuelectenerg-900	20	46	wide	wide	ADJ
fuelectenerg-900	20	47	frequency	frequency	NOUN
fuelectenerg-900	20	48	range	range	NOUN
fuelectenerg-900	20	49	,	,	PUNCT
fuelectenerg-900	20	50	as	as	ADV
fuelectenerg-900	20	51	well	well	ADV
fuelectenerg-900	20	52	as	as	ADP
fuelectenerg-900	20	53	for	for	ADP
fuelectenerg-900	20	54	those	those	PRON
fuelectenerg-900	20	55	with	with	ADP
fuelectenerg-900	20	56	tunable	tunable	ADJ
fuelectenerg-900	20	57	parameters	parameter	NOUN
fuelectenerg-900	20	58	,	,	PUNCT
fuelectenerg-900	20	59	which	which	PRON
fuelectenerg-900	20	60	will	will	AUX
fuelectenerg-900	20	61	be	be	AUX
fuelectenerg-900	20	62	integrated	integrate	VERB
fuelectenerg-900	20	63	in	in	ADP
fuelectenerg-900	20	64	cmos	cmos	ADJ
fuelectenerg-900	20	65	circuits	circuit	NOUN
fuelectenerg-900	20	66	.	.	PUNCT
fuelectenerg-900	21	1	nowadays	nowadays	ADV
fuelectenerg-900	21	2	,	,	PUNCT
fuelectenerg-900	21	3	mems	mem	NOUN
fuelectenerg-900	21	4	and	and	CCONJ
fuelectenerg-900	21	5	nems	nem	NOUN
fuelectenerg-900	21	6	technologies	technology	NOUN
fuelectenerg-900	21	7	are	be	AUX
fuelectenerg-900	21	8	considered	consider	VERB
fuelectenerg-900	21	9	to	to	PART
fuelectenerg-900	21	10	have	have	VERB
fuelectenerg-900	21	11	the	the	DET
fuelectenerg-900	21	12	potential	potential	NOUN
fuelectenerg-900	21	13	for	for	ADP
fuelectenerg-900	21	14	the	the	DET
fuelectenerg-900	21	15	realization	realization	NOUN
fuelectenerg-900	21	16	of	of	ADP
fuelectenerg-900	21	17	rf	rf	VERB
fuelectenerg-900	21	18	components	component	NOUN
fuelectenerg-900	21	19	which	which	PRON
fuelectenerg-900	21	20	are	be	AUX
fuelectenerg-900	21	21	able	able	ADJ
fuelectenerg-900	21	22	to	to	PART
fuelectenerg-900	21	23	meet	meet	VERB
fuelectenerg-900	21	24	the	the	DET
fuelectenerg-900	21	25	mentioned	mention	VERB
fuelectenerg-900	21	26	requirements	requirement	NOUN
fuelectenerg-900	21	27	.	.	PUNCT
fuelectenerg-900	22	1	rf	rf	VERB
fuelectenerg-900	22	2	mems	mem	NOUN
fuelectenerg-900	22	3	/	/	SYM
fuelectenerg-900	22	4	nems	nem	NOUN
fuelectenerg-900	22	5	resonators	resonator	NOUN
fuelectenerg-900	22	6	are	be	AUX
fuelectenerg-900	22	7	being	be	AUX
fuelectenerg-900	22	8	developed	develop	VERB
fuelectenerg-900	22	9	with	with	ADP
fuelectenerg-900	22	10	the	the	DET
fuelectenerg-900	22	11	intention	intention	NOUN
fuelectenerg-900	22	12	to	to	PART
fuelectenerg-900	22	13	replace	replace	VERB
fuelectenerg-900	22	14	large	large	ADJ
fuelectenerg-900	22	15	off	off	ADP
fuelectenerg-900	22	16	-	-	PUNCT
fuelectenerg-900	22	17	chip	chip	NOUN
fuelectenerg-900	22	18	components	component	NOUN
fuelectenerg-900	22	19	,	,	PUNCT
fuelectenerg-900	22	20	such	such	ADJ
fuelectenerg-900	22	21	as	as	ADP
fuelectenerg-900	22	22	rf	rf	ADJ
fuelectenerg-900	22	23	filters	filter	NOUN
fuelectenerg-900	22	24	and	and	CCONJ
fuelectenerg-900	22	25	quartz	quartz	NOUN
fuelectenerg-900	22	26	resonators	resonator	NOUN
fuelectenerg-900	22	27	,	,	PUNCT
fuelectenerg-900	22	28	in	in	ADP
fuelectenerg-900	22	29	wireless	wireless	ADJ
fuelectenerg-900	22	30	transceivers	transceiver	NOUN
fuelectenerg-900	22	31	[	[	X
fuelectenerg-900	22	32	14	14	NUM
fuelectenerg-900	22	33	]	]	PUNCT
fuelectenerg-900	22	34	.	.	PUNCT
fuelectenerg-900	23	1	in	in	ADP
fuelectenerg-900	23	2	the	the	DET
fuelectenerg-900	23	3	first	first	ADJ
fuelectenerg-900	23	4	part	part	NOUN
fuelectenerg-900	23	5	of	of	ADP
fuelectenerg-900	23	6	this	this	DET
fuelectenerg-900	23	7	paper	paper	NOUN
fuelectenerg-900	23	8	we	we	PRON
fuelectenerg-900	23	9	present	present	VERB
fuelectenerg-900	23	10	a	a	DET
fuelectenerg-900	23	11	short	short	ADJ
fuelectenerg-900	23	12	overview	overview	NOUN
fuelectenerg-900	23	13	of	of	ADP
fuelectenerg-900	23	14	rf	rf	NOUN
fuelectenerg-900	23	15	mems	mem	NOUN
fuelectenerg-900	23	16	resonators	resonator	NOUN
fuelectenerg-900	23	17	,	,	PUNCT
fuelectenerg-900	23	18	including	include	VERB
fuelectenerg-900	23	19	their	their	PRON
fuelectenerg-900	23	20	classifications	classification	NOUN
fuelectenerg-900	23	21	,	,	PUNCT
fuelectenerg-900	23	22	principle	principle	NOUN
fuelectenerg-900	23	23	of	of	ADP
fuelectenerg-900	23	24	operation	operation	NOUN
fuelectenerg-900	23	25	,	,	PUNCT
fuelectenerg-900	23	26	their	their	PRON
fuelectenerg-900	23	27	main	main	ADJ
fuelectenerg-900	23	28	characteristics	characteristic	NOUN
fuelectenerg-900	23	29	relevant	relevant	ADJ
fuelectenerg-900	23	30	for	for	ADP
fuelectenerg-900	23	31	wireless	wireless	ADJ
fuelectenerg-900	23	32	transceiver	transceiver	NOUN
fuelectenerg-900	23	33	applications	application	NOUN
fuelectenerg-900	23	34	and	and	CCONJ
fuelectenerg-900	23	35	advantages	advantage	NOUN
fuelectenerg-900	23	36	compared	compare	VERB
fuelectenerg-900	23	37	to	to	ADP
fuelectenerg-900	23	38	solutions	solution	NOUN
fuelectenerg-900	23	39	based	base	VERB
fuelectenerg-900	23	40	on	on	ADP
fuelectenerg-900	23	41	rf	rf	NOUN
fuelectenerg-900	23	42	mems	mem	NOUN
fuelectenerg-900	23	43	/	/	SYM
fuelectenerg-900	23	44	nems	nem	NOUN
fuelectenerg-900	23	45	resonators	resonator	NOUN
fuelectenerg-900	23	46	for	for	ADP
fuelectenerg-900	23	47	wireless	wireless	ADJ
fuelectenerg-900	23	48	communication	communication	NOUN
fuelectenerg-900	23	49	systems	system	NOUN
fuelectenerg-900	23	50	and	and	CCONJ
fuelectenerg-900	23	51	adsorption	adsorption	NOUN
fuelectenerg-900	23	52	-	-	PUNCT
fuelectenerg-900	23	53	desorption	desorption	NOUN
fuelectenerg-900	23	54	phase	phase	NOUN
fuelectenerg-900	23	55	noise	noise	NOUN
fuelectenerg-900	23	56	347	347	NUM
fuelectenerg-900	23	57	conventional	conventional	ADJ
fuelectenerg-900	23	58	technologies	technology	NOUN
fuelectenerg-900	23	59	.	.	PUNCT
fuelectenerg-900	24	1	the	the	DET
fuelectenerg-900	24	2	achieved	achieve	VERB
fuelectenerg-900	24	3	values	value	NOUN
fuelectenerg-900	24	4	of	of	ADP
fuelectenerg-900	24	5	basic	basic	ADJ
fuelectenerg-900	24	6	parameters	parameter	NOUN
fuelectenerg-900	24	7	will	will	AUX
fuelectenerg-900	24	8	be	be	AUX
fuelectenerg-900	24	9	given	give	VERB
fuelectenerg-900	24	10	through	through	ADP
fuelectenerg-900	24	11	examples	example	NOUN
fuelectenerg-900	24	12	of	of	ADP
fuelectenerg-900	24	13	rf	rf	NOUN
fuelectenerg-900	24	14	mems	mem	NOUN
fuelectenerg-900	24	15	resonators	resonator	NOUN
fuelectenerg-900	24	16	reported	report	VERB
fuelectenerg-900	24	17	in	in	ADP
fuelectenerg-900	24	18	the	the	DET
fuelectenerg-900	24	19	literature	literature	NOUN
fuelectenerg-900	24	20	.	.	PUNCT
fuelectenerg-900	25	1	the	the	DET
fuelectenerg-900	25	2	capability	capability	NOUN
fuelectenerg-900	25	3	of	of	ADP
fuelectenerg-900	25	4	rf	rf	NOUN
fuelectenerg-900	25	5	mems	mem	NOUN
fuelectenerg-900	25	6	and	and	CCONJ
fuelectenerg-900	25	7	nems	nem	NOUN
fuelectenerg-900	25	8	resonators	resonator	NOUN
fuelectenerg-900	25	9	to	to	PART
fuelectenerg-900	25	10	meet	meet	VERB
fuelectenerg-900	25	11	future	future	ADJ
fuelectenerg-900	25	12	needs	need	NOUN
fuelectenerg-900	25	13	will	will	AUX
fuelectenerg-900	25	14	also	also	ADV
fuelectenerg-900	25	15	be	be	AUX
fuelectenerg-900	25	16	considered	consider	VERB
fuelectenerg-900	25	17	,	,	PUNCT
fuelectenerg-900	25	18	including	include	VERB
fuelectenerg-900	25	19	the	the	DET
fuelectenerg-900	25	20	possibility	possibility	NOUN
fuelectenerg-900	25	21	of	of	ADP
fuelectenerg-900	25	22	frequency	frequency	NOUN
fuelectenerg-900	25	23	tuning	tuning	NOUN
fuelectenerg-900	25	24	in	in	ADP
fuelectenerg-900	25	25	mems	mem	NOUN
fuelectenerg-900	25	26	and	and	CCONJ
fuelectenerg-900	25	27	nems	nem	NOUN
fuelectenerg-900	25	28	mechanical	mechanical	ADJ
fuelectenerg-900	25	29	resonators	resonator	NOUN
fuelectenerg-900	25	30	.	.	PUNCT
fuelectenerg-900	26	1	resonators	resonator	NOUN
fuelectenerg-900	26	2	based	base	VERB
fuelectenerg-900	26	3	on	on	ADP
fuelectenerg-900	26	4	two	two	NUM
fuelectenerg-900	26	5	-	-	PUNCT
fuelectenerg-900	26	6	dimensional	dimensional	ADJ
fuelectenerg-900	26	7	(	(	PUNCT
fuelectenerg-900	26	8	2d	2d	NOUN
fuelectenerg-900	26	9	)	)	PUNCT
fuelectenerg-900	26	10	crystals	crystal	NOUN
fuelectenerg-900	26	11	(	(	PUNCT
fuelectenerg-900	26	12	such	such	ADJ
fuelectenerg-900	26	13	as	as	ADP
fuelectenerg-900	26	14	graphene	graphene	NOUN
fuelectenerg-900	26	15	)	)	PUNCT
fuelectenerg-900	26	16	will	will	AUX
fuelectenerg-900	26	17	also	also	ADV
fuelectenerg-900	26	18	be	be	AUX
fuelectenerg-900	26	19	included	include	VERB
fuelectenerg-900	26	20	in	in	ADP
fuelectenerg-900	26	21	the	the	DET
fuelectenerg-900	26	22	analysis	analysis	NOUN
fuelectenerg-900	26	23	.	.	PUNCT
fuelectenerg-900	27	1	the	the	DET
fuelectenerg-900	27	2	comment	comment	NOUN
fuelectenerg-900	27	3	will	will	AUX
fuelectenerg-900	27	4	be	be	AUX
fuelectenerg-900	27	5	given	give	VERB
fuelectenerg-900	27	6	on	on	ADP
fuelectenerg-900	27	7	the	the	DET
fuelectenerg-900	27	8	necessary	necessary	ADJ
fuelectenerg-900	27	9	improvements	improvement	NOUN
fuelectenerg-900	27	10	and	and	CCONJ
fuelectenerg-900	27	11	the	the	DET
fuelectenerg-900	27	12	direction	direction	NOUN
fuelectenerg-900	27	13	of	of	ADP
fuelectenerg-900	27	14	future	future	ADJ
fuelectenerg-900	27	15	research	research	NOUN
fuelectenerg-900	27	16	in	in	ADP
fuelectenerg-900	27	17	this	this	DET
fuelectenerg-900	27	18	field	field	NOUN
fuelectenerg-900	27	19	,	,	PUNCT
fuelectenerg-900	27	20	with	with	ADP
fuelectenerg-900	27	21	the	the	DET
fuelectenerg-900	27	22	intention	intention	NOUN
fuelectenerg-900	27	23	to	to	PART
fuelectenerg-900	27	24	optimize	optimize	VERB
fuelectenerg-900	27	25	rf	rf	NOUN
fuelectenerg-900	27	26	mems	mem	NOUN
fuelectenerg-900	27	27	and	and	CCONJ
fuelectenerg-900	27	28	nems	nem	NOUN
fuelectenerg-900	27	29	components	component	NOUN
fuelectenerg-900	27	30	according	accord	VERB
fuelectenerg-900	27	31	to	to	ADP
fuelectenerg-900	27	32	requirements	requirement	NOUN
fuelectenerg-900	27	33	of	of	ADP
fuelectenerg-900	27	34	both	both	CCONJ
fuelectenerg-900	27	35	current	current	ADJ
fuelectenerg-900	27	36	and	and	CCONJ
fuelectenerg-900	27	37	future	future	ADJ
fuelectenerg-900	27	38	systems	system	NOUN
fuelectenerg-900	27	39	,	,	PUNCT
fuelectenerg-900	27	40	especially	especially	ADV
fuelectenerg-900	27	41	having	have	VERB
fuelectenerg-900	27	42	in	in	ADP
fuelectenerg-900	27	43	mind	mind	NOUN
fuelectenerg-900	27	44	the	the	DET
fuelectenerg-900	27	45	need	need	NOUN
fuelectenerg-900	27	46	for	for	ADP
fuelectenerg-900	27	47	nems	nem	NOUN
fuelectenerg-900	27	48	resonators	resonator	NOUN
fuelectenerg-900	27	49	.	.	PUNCT
fuelectenerg-900	28	1	the	the	DET
fuelectenerg-900	28	2	analysis	analysis	NOUN
fuelectenerg-900	28	3	of	of	ADP
fuelectenerg-900	28	4	noise	noise	NOUN
fuelectenerg-900	28	5	generation	generation	NOUN
fuelectenerg-900	28	6	mechanisms	mechanism	NOUN
fuelectenerg-900	28	7	which	which	PRON
fuelectenerg-900	28	8	are	be	AUX
fuelectenerg-900	28	9	specific	specific	ADJ
fuelectenerg-900	28	10	for	for	ADP
fuelectenerg-900	28	11	these	these	DET
fuelectenerg-900	28	12	components	component	NOUN
fuelectenerg-900	28	13	is	be	AUX
fuelectenerg-900	28	14	of	of	ADP
fuelectenerg-900	28	15	particular	particular	ADJ
fuelectenerg-900	28	16	significance	significance	NOUN
fuelectenerg-900	28	17	in	in	ADP
fuelectenerg-900	28	18	this	this	DET
fuelectenerg-900	28	19	respect	respect	NOUN
fuelectenerg-900	28	20	:	:	PUNCT
fuelectenerg-900	28	21	it	it	PRON
fuelectenerg-900	28	22	leads	lead	VERB
fuelectenerg-900	28	23	to	to	ADP
fuelectenerg-900	28	24	optimal	optimal	ADJ
fuelectenerg-900	28	25	resonator	resonator	NOUN
fuelectenerg-900	28	26	's	's	PART
fuelectenerg-900	28	27	design	design	NOUN
fuelectenerg-900	28	28	and	and	CCONJ
fuelectenerg-900	28	29	operating	operating	NOUN
fuelectenerg-900	28	30	conditions	condition	NOUN
fuelectenerg-900	28	31	,	,	PUNCT
fuelectenerg-900	28	32	which	which	PRON
fuelectenerg-900	28	33	ensure	ensure	VERB
fuelectenerg-900	28	34	minimal	minimal	ADJ
fuelectenerg-900	28	35	noise	noise	NOUN
fuelectenerg-900	28	36	and	and	CCONJ
fuelectenerg-900	28	37	,	,	PUNCT
fuelectenerg-900	28	38	accordingly	accordingly	ADV
fuelectenerg-900	28	39	,	,	PUNCT
fuelectenerg-900	28	40	minimization	minimization	NOUN
fuelectenerg-900	28	41	of	of	ADP
fuelectenerg-900	28	42	signal	signal	ADJ
fuelectenerg-900	28	43	degradation	degradation	NOUN
fuelectenerg-900	28	44	.	.	PUNCT
fuelectenerg-900	29	1	in	in	ADP
fuelectenerg-900	29	2	the	the	DET
fuelectenerg-900	29	3	second	second	ADJ
fuelectenerg-900	29	4	part	part	NOUN
fuelectenerg-900	29	5	of	of	ADP
fuelectenerg-900	29	6	the	the	DET
fuelectenerg-900	29	7	paper	paper	NOUN
fuelectenerg-900	29	8	we	we	PRON
fuelectenerg-900	29	9	will	will	AUX
fuelectenerg-900	29	10	present	present	VERB
fuelectenerg-900	29	11	the	the	DET
fuelectenerg-900	29	12	analysis	analysis	NOUN
fuelectenerg-900	29	13	of	of	ADP
fuelectenerg-900	29	14	adsorption	adsorption	NOUN
fuelectenerg-900	29	15	-	-	PUNCT
fuelectenerg-900	29	16	desorption	desorption	NOUN
fuelectenerg-900	29	17	(	(	PUNCT
fuelectenerg-900	29	18	ad	ad	NOUN
fuelectenerg-900	29	19	)	)	PUNCT
fuelectenerg-900	29	20	noise	noise	NOUN
fuelectenerg-900	29	21	in	in	ADP
fuelectenerg-900	29	22	rf	rf	NOUN
fuelectenerg-900	29	23	mems	mem	NOUN
fuelectenerg-900	29	24	and	and	CCONJ
fuelectenerg-900	29	25	nems	nem	NOUN
fuelectenerg-900	29	26	electromechanical	electromechanical	ADJ
fuelectenerg-900	29	27	resonators	resonator	NOUN
fuelectenerg-900	29	28	,	,	PUNCT
fuelectenerg-900	29	29	which	which	PRON
fuelectenerg-900	29	30	becomes	becomes	AUX
fuelectenerg-900	29	31	pronounced	pronounce	VERB
fuelectenerg-900	29	32	with	with	ADP
fuelectenerg-900	29	33	components	component	NOUN
fuelectenerg-900	29	34	'	'	PART
fuelectenerg-900	29	35	decreasing	decrease	VERB
fuelectenerg-900	29	36	dimensions	dimension	NOUN
fuelectenerg-900	29	37	and	and	CCONJ
fuelectenerg-900	29	38	mass	mass	NOUN
fuelectenerg-900	29	39	.	.	PUNCT
fuelectenerg-900	30	1	finally	finally	ADV
fuelectenerg-900	30	2	,	,	PUNCT
fuelectenerg-900	30	3	we	we	PRON
fuelectenerg-900	30	4	present	present	VERB
fuelectenerg-900	30	5	a	a	DET
fuelectenerg-900	30	6	theoretical	theoretical	ADJ
fuelectenerg-900	30	7	model	model	NOUN
fuelectenerg-900	30	8	of	of	ADP
fuelectenerg-900	30	9	phase	phase	NOUN
fuelectenerg-900	30	10	noise	noise	NOUN
fuelectenerg-900	30	11	in	in	ADP
fuelectenerg-900	30	12	oscillators	oscillator	NOUN
fuelectenerg-900	30	13	using	use	VERB
fuelectenerg-900	30	14	rf	rf	ADJ
fuelectenerg-900	30	15	mems	mem	NOUN
fuelectenerg-900	30	16	/	/	SYM
fuelectenerg-900	30	17	nems	nem	NOUN
fuelectenerg-900	30	18	resonators	resonator	NOUN
fuelectenerg-900	30	19	as	as	ADP
fuelectenerg-900	30	20	frequency	frequency	NOUN
fuelectenerg-900	30	21	determining	determine	VERB
fuelectenerg-900	30	22	elements	element	NOUN
fuelectenerg-900	30	23	,	,	PUNCT
fuelectenerg-900	30	24	considering	consider	VERB
fuelectenerg-900	30	25	the	the	DET
fuelectenerg-900	30	26	influence	influence	NOUN
fuelectenerg-900	30	27	of	of	ADP
fuelectenerg-900	30	28	the	the	DET
fuelectenerg-900	30	29	resonator	resonator	NOUN
fuelectenerg-900	30	30	ad	ad	NOUN
fuelectenerg-900	30	31	noise	noise	NOUN
fuelectenerg-900	30	32	.	.	PUNCT
fuelectenerg-900	31	1	2	2	X
fuelectenerg-900	31	2	.	.	X
fuelectenerg-900	31	3	rf	rf	NOUN
fuelectenerg-900	31	4	mems	mem	NOUN
fuelectenerg-900	31	5	and	and	CCONJ
fuelectenerg-900	31	6	nems	nem	NOUN
fuelectenerg-900	31	7	resonators	resonator	VERB
fuelectenerg-900	31	8	radio	radio	NOUN
fuelectenerg-900	31	9	-	-	PUNCT
fuelectenerg-900	31	10	frequency	frequency	NOUN
fuelectenerg-900	31	11	mems	mem	NOUN
fuelectenerg-900	31	12	and	and	CCONJ
fuelectenerg-900	31	13	nems	nem	NOUN
fuelectenerg-900	31	14	technologies	technology	NOUN
fuelectenerg-900	31	15	are	be	AUX
fuelectenerg-900	31	16	intended	intend	VERB
fuelectenerg-900	31	17	for	for	ADP
fuelectenerg-900	31	18	the	the	DET
fuelectenerg-900	31	19	realization	realization	NOUN
fuelectenerg-900	31	20	of	of	ADP
fuelectenerg-900	31	21	mems	mem	NOUN
fuelectenerg-900	31	22	and	and	CCONJ
fuelectenerg-900	31	23	nems	nem	NOUN
fuelectenerg-900	31	24	passive	passive	ADJ
fuelectenerg-900	31	25	components	component	NOUN
fuelectenerg-900	31	26	variable	variable	ADJ
fuelectenerg-900	31	27	capacitors	capacitor	NOUN
fuelectenerg-900	31	28	,	,	PUNCT
fuelectenerg-900	31	29	inductors	inductor	NOUN
fuelectenerg-900	31	30	,	,	PUNCT
fuelectenerg-900	31	31	resonators	resonator	NOUN
fuelectenerg-900	31	32	,	,	PUNCT
fuelectenerg-900	31	33	switches	switch	NOUN
fuelectenerg-900	31	34	,	,	PUNCT
fuelectenerg-900	31	35	which	which	PRON
fuelectenerg-900	31	36	may	may	AUX
fuelectenerg-900	31	37	be	be	AUX
fuelectenerg-900	31	38	basic	basic	ADJ
fuelectenerg-900	31	39	elements	element	NOUN
fuelectenerg-900	31	40	of	of	ADP
fuelectenerg-900	31	41	more	more	ADV
fuelectenerg-900	31	42	complex	complex	ADJ
fuelectenerg-900	31	43	functional	functional	ADJ
fuelectenerg-900	31	44	blocks	block	NOUN
fuelectenerg-900	31	45	such	such	ADJ
fuelectenerg-900	31	46	as	as	ADP
fuelectenerg-900	31	47	tunable	tunable	ADJ
fuelectenerg-900	31	48	filters	filter	NOUN
fuelectenerg-900	31	49	,	,	PUNCT
fuelectenerg-900	31	50	impedance	impedance	NOUN
fuelectenerg-900	31	51	-	-	PUNCT
fuelectenerg-900	31	52	matching	matching	NOUN
fuelectenerg-900	31	53	networks	network	NOUN
fuelectenerg-900	31	54	,	,	PUNCT
fuelectenerg-900	31	55	phase	phase	NOUN
fuelectenerg-900	31	56	shifters	shifter	NOUN
fuelectenerg-900	31	57	,	,	PUNCT
fuelectenerg-900	31	58	reference	reference	NOUN
fuelectenerg-900	31	59	oscillators	oscillator	NOUN
fuelectenerg-900	31	60	,	,	PUNCT
fuelectenerg-900	31	61	frequency	frequency	NOUN
fuelectenerg-900	31	62	synthesizers	synthesizer	NOUN
fuelectenerg-900	31	63	,	,	PUNCT
fuelectenerg-900	31	64	antenna	antenna	NOUN
fuelectenerg-900	31	65	switches	switch	NOUN
fuelectenerg-900	31	66	etc	etc	X
fuelectenerg-900	31	67	,	,	PUNCT
fuelectenerg-900	31	68	all	all	PRON
fuelectenerg-900	31	69	of	of	ADP
fuelectenerg-900	31	70	them	they	PRON
fuelectenerg-900	31	71	operating	operate	VERB
fuelectenerg-900	31	72	at	at	ADP
fuelectenerg-900	31	73	radio	radio	NOUN
fuelectenerg-900	31	74	frequencies	frequency	NOUN
fuelectenerg-900	31	75	to	to	ADP
fuelectenerg-900	31	76	mm	mm	NOUN
fuelectenerg-900	31	77	-	-	PUNCT
fuelectenerg-900	31	78	wave	wave	NOUN
fuelectenerg-900	31	79	frequencies	frequency	NOUN
fuelectenerg-900	31	80	(	(	PUNCT
fuelectenerg-900	31	81	i.e.	i.e.	X
fuelectenerg-900	31	82	up	up	ADP
fuelectenerg-900	31	83	to	to	ADP
fuelectenerg-900	31	84	the	the	DET
fuelectenerg-900	31	85	order	order	NOUN
fuelectenerg-900	31	86	of	of	ADP
fuelectenerg-900	31	87	10	10	NUM
fuelectenerg-900	31	88	ghz	ghz	NOUN
fuelectenerg-900	31	89	and	and	CCONJ
fuelectenerg-900	31	90	above	above	ADV
fuelectenerg-900	31	91	)	)	PUNCT
fuelectenerg-900	31	92	.	.	PUNCT
fuelectenerg-900	32	1	the	the	DET
fuelectenerg-900	32	2	development	development	NOUN
fuelectenerg-900	32	3	of	of	ADP
fuelectenerg-900	32	4	rf	rf	NOUN
fuelectenerg-900	32	5	mems	mem	NOUN
fuelectenerg-900	32	6	components	component	NOUN
fuelectenerg-900	32	7	began	begin	VERB
fuelectenerg-900	32	8	at	at	ADP
fuelectenerg-900	32	9	the	the	DET
fuelectenerg-900	32	10	end	end	NOUN
fuelectenerg-900	32	11	of	of	ADP
fuelectenerg-900	32	12	1980s	1980s	NUM
fuelectenerg-900	32	13	.	.	PUNCT
fuelectenerg-900	33	1	high	high	ADJ
fuelectenerg-900	33	2	rf	rf	NOUN
fuelectenerg-900	33	3	performance	performance	NOUN
fuelectenerg-900	33	4	(	(	PUNCT
fuelectenerg-900	33	5	even	even	ADV
fuelectenerg-900	33	6	of	of	ADP
fuelectenerg-900	33	7	tunable	tunable	ADJ
fuelectenerg-900	33	8	components	component	NOUN
fuelectenerg-900	33	9	)	)	PUNCT
fuelectenerg-900	33	10	,	,	PUNCT
fuelectenerg-900	33	11	dimensions	dimension	NOUN
fuelectenerg-900	33	12	at	at	ADP
fuelectenerg-900	33	13	the	the	DET
fuelectenerg-900	33	14	micrometer	micrometer	NOUN
fuelectenerg-900	33	15	scale	scale	NOUN
fuelectenerg-900	33	16	,	,	PUNCT
fuelectenerg-900	33	17	the	the	DET
fuelectenerg-900	33	18	technological	technological	ADJ
fuelectenerg-900	33	19	compatibility	compatibility	NOUN
fuelectenerg-900	33	20	with	with	ADP
fuelectenerg-900	33	21	cmos	cmos	PROPN
fuelectenerg-900	33	22	and	and	CCONJ
fuelectenerg-900	33	23	other	other	ADJ
fuelectenerg-900	33	24	ic	ic	PROPN
fuelectenerg-900	33	25	technologies	technology	NOUN
fuelectenerg-900	33	26	which	which	PRON
fuelectenerg-900	33	27	enable	enable	VERB
fuelectenerg-900	33	28	their	their	PRON
fuelectenerg-900	33	29	integration	integration	NOUN
fuelectenerg-900	33	30	with	with	ADP
fuelectenerg-900	33	31	active	active	ADJ
fuelectenerg-900	33	32	electronics	electronic	NOUN
fuelectenerg-900	33	33	,	,	PUNCT
fuelectenerg-900	33	34	low	low	ADJ
fuelectenerg-900	33	35	power	power	NOUN
fuelectenerg-900	33	36	consumption	consumption	NOUN
fuelectenerg-900	33	37	,	,	PUNCT
fuelectenerg-900	33	38	and	and	CCONJ
fuelectenerg-900	33	39	mass	mass	NOUN
fuelectenerg-900	33	40	production	production	NOUN
fuelectenerg-900	33	41	,	,	PUNCT
fuelectenerg-900	33	42	make	make	VERB
fuelectenerg-900	33	43	them	they	PRON
fuelectenerg-900	33	44	promising	promise	VERB
fuelectenerg-900	33	45	candidates	candidate	NOUN
fuelectenerg-900	33	46	for	for	ADP
fuelectenerg-900	33	47	application	application	NOUN
fuelectenerg-900	33	48	in	in	ADP
fuelectenerg-900	33	49	wireless	wireless	ADJ
fuelectenerg-900	33	50	transceivers	transceiver	NOUN
fuelectenerg-900	33	51	.	.	PUNCT
fuelectenerg-900	34	1	integrated	integrate	VERB
fuelectenerg-900	34	2	rf	rf	NOUN
fuelectenerg-900	34	3	mems	mem	NOUN
fuelectenerg-900	34	4	components	component	NOUN
fuelectenerg-900	34	5	can	can	AUX
fuelectenerg-900	34	6	directly	directly	ADV
fuelectenerg-900	34	7	replace	replace	VERB
fuelectenerg-900	34	8	off	off	ADP
fuelectenerg-900	34	9	-	-	PUNCT
fuelectenerg-900	34	10	chip	chip	NOUN
fuelectenerg-900	34	11	traditional	traditional	ADJ
fuelectenerg-900	34	12	components	component	NOUN
fuelectenerg-900	34	13	(	(	PUNCT
fuelectenerg-900	34	14	rf	rf	NOUN
fuelectenerg-900	34	15	filters	filter	NOUN
fuelectenerg-900	34	16	and	and	CCONJ
fuelectenerg-900	34	17	crystal	crystal	NOUN
fuelectenerg-900	34	18	oscillator	oscillator	NOUN
fuelectenerg-900	34	19	references	reference	NOUN
fuelectenerg-900	34	20	,	,	PUNCT
fuelectenerg-900	34	21	as	as	ADV
fuelectenerg-900	34	22	well	well	ADV
fuelectenerg-900	34	23	as	as	ADP
fuelectenerg-900	34	24	other	other	ADJ
fuelectenerg-900	34	25	passives	passive	NOUN
fuelectenerg-900	34	26	and	and	CCONJ
fuelectenerg-900	34	27	rf	rf	NOUN
fuelectenerg-900	34	28	switches	switch	NOUN
fuelectenerg-900	34	29	)	)	PUNCT
fuelectenerg-900	34	30	in	in	ADP
fuelectenerg-900	34	31	conventional	conventional	ADJ
fuelectenerg-900	34	32	transceiver	transceiver	NOUN
fuelectenerg-900	34	33	architectures	architecture	NOUN
fuelectenerg-900	34	34	,	,	PUNCT
fuelectenerg-900	34	35	as	as	SCONJ
fuelectenerg-900	34	36	shown	show	VERB
fuelectenerg-900	34	37	in	in	ADP
fuelectenerg-900	34	38	fig	fig	NOUN
fuelectenerg-900	34	39	.	.	PUNCT
fuelectenerg-900	35	1	1a	1a	NOUN
fuelectenerg-900	35	2	.	.	PUNCT
fuelectenerg-900	36	1	furthermore	furthermore	ADV
fuelectenerg-900	36	2	,	,	PUNCT
fuelectenerg-900	36	3	tunable	tunable	ADJ
fuelectenerg-900	36	4	rf	rf	NOUN
fuelectenerg-900	36	5	mems	mem	NOUN
fuelectenerg-900	36	6	components	component	NOUN
fuelectenerg-900	36	7	can	can	AUX
fuelectenerg-900	36	8	be	be	AUX
fuelectenerg-900	36	9	used	use	VERB
fuelectenerg-900	36	10	to	to	PART
fuelectenerg-900	36	11	ensure	ensure	VERB
fuelectenerg-900	36	12	front	front	ADJ
fuelectenerg-900	36	13	-	-	PUNCT
fuelectenerg-900	36	14	end	end	NOUN
fuelectenerg-900	36	15	reconfigurability	reconfigurability	NOUN
fuelectenerg-900	36	16	in	in	ADP
fuelectenerg-900	36	17	multiband	multiband	NOUN
fuelectenerg-900	36	18	multistandard	multistandard	NOUN
fuelectenerg-900	36	19	transceivers	transceiver	NOUN
fuelectenerg-900	36	20	,	,	PUNCT
fuelectenerg-900	36	21	significantly	significantly	ADV
fuelectenerg-900	36	22	reducing	reduce	VERB
fuelectenerg-900	36	23	its	its	PRON
fuelectenerg-900	36	24	complexity	complexity	NOUN
fuelectenerg-900	36	25	,	,	PUNCT
fuelectenerg-900	36	26	as	as	SCONJ
fuelectenerg-900	36	27	shown	show	VERB
fuelectenerg-900	36	28	in	in	ADP
fuelectenerg-900	36	29	fig	fig	NOUN
fuelectenerg-900	36	30	.	.	PUNCT
fuelectenerg-900	37	1	1b	1b	NUM
fuelectenerg-900	37	2	.	.	PUNCT
fuelectenerg-900	38	1	2.1	2.1	NUM
fuelectenerg-900	38	2	.	.	PUNCT
fuelectenerg-900	39	1	rf	rf	NOUN
fuelectenerg-900	39	2	mems	mem	NOUN
fuelectenerg-900	39	3	resonators	resonator	NOUN
fuelectenerg-900	39	4	–	–	PUNCT
fuelectenerg-900	39	5	a	a	DET
fuelectenerg-900	39	6	short	short	ADJ
fuelectenerg-900	39	7	overview	overview	NOUN
fuelectenerg-900	39	8	of	of	ADP
fuelectenerg-900	39	9	existing	exist	VERB
fuelectenerg-900	39	10	components	component	NOUN
fuelectenerg-900	39	11	and	and	CCONJ
fuelectenerg-900	39	12	future	future	ADJ
fuelectenerg-900	39	13	needs	need	NOUN
fuelectenerg-900	39	14	resonator	resonator	NOUN
fuelectenerg-900	39	15	is	be	AUX
fuelectenerg-900	39	16	a	a	DET
fuelectenerg-900	39	17	basic	basic	ADJ
fuelectenerg-900	39	18	element	element	NOUN
fuelectenerg-900	39	19	of	of	ADP
fuelectenerg-900	39	20	oscillators	oscillator	NOUN
fuelectenerg-900	39	21	and	and	CCONJ
fuelectenerg-900	39	22	frequency	frequency	VERB
fuelectenerg-900	39	23	selective	selective	ADJ
fuelectenerg-900	39	24	circuits	circuit	NOUN
fuelectenerg-900	39	25	.	.	PUNCT
fuelectenerg-900	40	1	the	the	DET
fuelectenerg-900	40	2	applications	application	NOUN
fuelectenerg-900	40	3	of	of	ADP
fuelectenerg-900	40	4	resonators	resonator	NOUN
fuelectenerg-900	40	5	in	in	ADP
fuelectenerg-900	40	6	wireless	wireless	ADJ
fuelectenerg-900	40	7	transceivers	transceiver	NOUN
fuelectenerg-900	40	8	are	be	AUX
fuelectenerg-900	40	9	numerous	numerous	ADJ
fuelectenerg-900	40	10	.	.	PUNCT
fuelectenerg-900	41	1	they	they	PRON
fuelectenerg-900	41	2	include	include	VERB
fuelectenerg-900	41	3	rf	rf	ADJ
fuelectenerg-900	41	4	filters	filter	NOUN
fuelectenerg-900	41	5	and	and	CCONJ
fuelectenerg-900	41	6	duplexers	duplexer	NOUN
fuelectenerg-900	41	7	,	,	PUNCT
fuelectenerg-900	41	8	tunable	tunable	NOUN
fuelectenerg-900	41	9	tanks	tank	NOUN
fuelectenerg-900	41	10	of	of	ADP
fuelectenerg-900	41	11	voltage	voltage	NOUN
fuelectenerg-900	41	12	controlled	control	VERB
fuelectenerg-900	41	13	oscillators	oscillator	NOUN
fuelectenerg-900	41	14	(	(	PUNCT
fuelectenerg-900	41	15	vcos	vcos	PROPN
fuelectenerg-900	41	16	)	)	PUNCT
fuelectenerg-900	41	17	,	,	PUNCT
fuelectenerg-900	41	18	frequency	frequency	NOUN
fuelectenerg-900	41	19	references	reference	NOUN
fuelectenerg-900	41	20	,	,	PUNCT
fuelectenerg-900	41	21	frequency	frequency	NOUN
fuelectenerg-900	41	22	synthesizers	synthesizer	NOUN
fuelectenerg-900	41	23	,	,	PUNCT
fuelectenerg-900	41	24	clock	clock	NOUN
fuelectenerg-900	41	25	generators	generator	NOUN
fuelectenerg-900	41	26	.	.	PUNCT
fuelectenerg-900	42	1	the	the	DET
fuelectenerg-900	42	2	basic	basic	ADJ
fuelectenerg-900	42	3	parameters	parameter	NOUN
fuelectenerg-900	42	4	of	of	ADP
fuelectenerg-900	42	5	resonators	resonator	NOUN
fuelectenerg-900	42	6	are	be	AUX
fuelectenerg-900	42	7	the	the	DET
fuelectenerg-900	42	8	resonance	resonance	NOUN
fuelectenerg-900	42	9	frequency	frequency	NOUN
fuelectenerg-900	42	10	,	,	PUNCT
fuelectenerg-900	42	11	f0	f0	PROPN
fuelectenerg-900	42	12	,	,	PUNCT
fuelectenerg-900	42	13	and	and	CCONJ
fuelectenerg-900	42	14	the	the	DET
fuelectenerg-900	42	15	quality	quality	NOUN
fuelectenerg-900	42	16	factor	factor	NOUN
fuelectenerg-900	42	17	,	,	PUNCT
fuelectenerg-900	42	18	q	q	X
fuelectenerg-900	42	19	,	,	PUNCT
fuelectenerg-900	42	20	while	while	SCONJ
fuelectenerg-900	42	21	other	other	ADJ
fuelectenerg-900	42	22	important	important	ADJ
fuelectenerg-900	42	23	parameters	parameter	NOUN
fuelectenerg-900	42	24	are	be	AUX
fuelectenerg-900	42	25	frequency	frequency	NOUN
fuelectenerg-900	42	26	stability	stability	NOUN
fuelectenerg-900	42	27	(	(	PUNCT
fuelectenerg-900	42	28	in	in	ADP
fuelectenerg-900	42	29	time	time	NOUN
fuelectenerg-900	42	30	–	–	PUNCT
fuelectenerg-900	42	31	e.g.	e.g.	ADV
fuelectenerg-900	42	32	long	long	ADJ
fuelectenerg-900	42	33	/	/	SYM
fuelectenerg-900	42	34	short	short	ADJ
fuelectenerg-900	42	35	-	-	PUNCT
fuelectenerg-900	42	36	term	term	NOUN
fuelectenerg-900	42	37	;	;	PUNCT
fuelectenerg-900	42	38	with	with	ADP
fuelectenerg-900	42	39	temperature	temperature	NOUN
fuelectenerg-900	42	40	;	;	PUNCT
fuelectenerg-900	42	41	with	with	ADP
fuelectenerg-900	42	42	pressure	pressure	NOUN
fuelectenerg-900	42	43	etc	etc	X
fuelectenerg-900	42	44	.	.	X
fuelectenerg-900	42	45	)	)	PUNCT
fuelectenerg-900	42	46	,	,	PUNCT
fuelectenerg-900	42	47	power	power	NOUN
fuelectenerg-900	42	48	handling	handling	NOUN
fuelectenerg-900	42	49	capability	capability	NOUN
fuelectenerg-900	42	50	and	and	CCONJ
fuelectenerg-900	42	51	series	series	NOUN
fuelectenerg-900	42	52	resistance	resistance	NOUN
fuelectenerg-900	42	53	.	.	PUNCT
fuelectenerg-900	43	1	the	the	DET
fuelectenerg-900	43	2	value	value	NOUN
fuelectenerg-900	43	3	of	of	ADP
fuelectenerg-900	43	4	the	the	DET
fuelectenerg-900	43	5	product	product	NOUN
fuelectenerg-900	43	6	f0·q	f0·q	NOUN
fuelectenerg-900	43	7	is	be	AUX
fuelectenerg-900	43	8	often	often	ADV
fuelectenerg-900	43	9	348	348	NUM
fuelectenerg-900	43	10	i.	i.	NOUN
fuelectenerg-900	43	11	jokić	jokić	PROPN
fuelectenerg-900	43	12	,	,	PUNCT
fuelectenerg-900	43	13	m.	m.	NOUN
fuelectenerg-900	43	14	frantlović	frantlović	NOUN
fuelectenerg-900	43	15	,	,	PUNCT
fuelectenerg-900	43	16	z.	z.	PROPN
fuelectenerg-900	43	17	djurić	djurić	PROPN
fuelectenerg-900	43	18	,	,	PUNCT
fuelectenerg-900	43	19	m.	m.	NOUN
fuelectenerg-900	43	20	l.	l.	PROPN
fuelectenerg-900	43	21	dukić	dukić	PROPN
fuelectenerg-900	43	22	used	use	VERB
fuelectenerg-900	43	23	as	as	ADP
fuelectenerg-900	43	24	an	an	DET
fuelectenerg-900	43	25	indicator	indicator	NOUN
fuelectenerg-900	43	26	of	of	ADP
fuelectenerg-900	43	27	the	the	DET
fuelectenerg-900	43	28	performance	performance	NOUN
fuelectenerg-900	43	29	of	of	ADP
fuelectenerg-900	43	30	the	the	DET
fuelectenerg-900	43	31	resonator	resonator	NOUN
fuelectenerg-900	43	32	.	.	PUNCT
fuelectenerg-900	44	1	the	the	DET
fuelectenerg-900	44	2	required	require	VERB
fuelectenerg-900	44	3	values	value	NOUN
fuelectenerg-900	44	4	of	of	ADP
fuelectenerg-900	44	5	the	the	DET
fuelectenerg-900	44	6	resonator	resonator	NOUN
fuelectenerg-900	44	7	parameters	parameter	NOUN
fuelectenerg-900	44	8	depend	depend	VERB
fuelectenerg-900	44	9	on	on	ADP
fuelectenerg-900	44	10	its	its	PRON
fuelectenerg-900	44	11	application	application	NOUN
fuelectenerg-900	44	12	.	.	PUNCT
fuelectenerg-900	45	1	for	for	ADP
fuelectenerg-900	45	2	example	example	NOUN
fuelectenerg-900	45	3	,	,	PUNCT
fuelectenerg-900	45	4	resonance	resonance	NOUN
fuelectenerg-900	45	5	frequencies	frequency	NOUN
fuelectenerg-900	45	6	of	of	ADP
fuelectenerg-900	45	7	resonators	resonator	NOUN
fuelectenerg-900	45	8	used	use	VERB
fuelectenerg-900	45	9	in	in	ADP
fuelectenerg-900	45	10	various	various	ADJ
fuelectenerg-900	45	11	stable	stable	ADJ
fuelectenerg-900	45	12	frequency	frequency	NOUN
fuelectenerg-900	45	13	references	reference	NOUN
fuelectenerg-900	45	14	(	(	PUNCT
fuelectenerg-900	45	15	for	for	ADP
fuelectenerg-900	45	16	the	the	DET
fuelectenerg-900	45	17	operation	operation	NOUN
fuelectenerg-900	45	18	of	of	ADP
fuelectenerg-900	45	19	cellular	cellular	ADJ
fuelectenerg-900	45	20	modules	module	NOUN
fuelectenerg-900	45	21	,	,	PUNCT
fuelectenerg-900	45	22	gps	gps	NOUN
fuelectenerg-900	45	23	modules	module	NOUN
fuelectenerg-900	45	24	,	,	PUNCT
fuelectenerg-900	45	25	microprocessors	microprocessor	NOUN
fuelectenerg-900	45	26	,	,	PUNCT
fuelectenerg-900	45	27	real	real	ADJ
fuelectenerg-900	45	28	-	-	PUNCT
fuelectenerg-900	45	29	time	time	NOUN
fuelectenerg-900	45	30	clocks	clock	NOUN
fuelectenerg-900	45	31	etc	etc	X
fuelectenerg-900	45	32	.	.	PUNCT
fuelectenerg-900	45	33	)	)	PUNCT
fuelectenerg-900	45	34	and	and	CCONJ
fuelectenerg-900	45	35	filters	filter	NOUN
fuelectenerg-900	45	36	with	with	ADP
fuelectenerg-900	45	37	different	different	ADJ
fuelectenerg-900	45	38	central	central	ADJ
fuelectenerg-900	45	39	frequencies	frequency	NOUN
fuelectenerg-900	45	40	in	in	ADP
fuelectenerg-900	45	41	wireless	wireless	ADJ
fuelectenerg-900	45	42	transceivers	transceiver	NOUN
fuelectenerg-900	45	43	cover	cover	VERB
fuelectenerg-900	45	44	a	a	DET
fuelectenerg-900	45	45	wide	wide	ADJ
fuelectenerg-900	45	46	range	range	NOUN
fuelectenerg-900	45	47	(	(	PUNCT
fuelectenerg-900	45	48	f0	f0	PROPN
fuelectenerg-900	45	49	are	be	AUX
fuelectenerg-900	45	50	of	of	ADP
fuelectenerg-900	45	51	the	the	DET
fuelectenerg-900	45	52	order	order	NOUN
fuelectenerg-900	45	53	of	of	ADP
fuelectenerg-900	45	54	1	1	NUM
fuelectenerg-900	45	55	khz	khz	NOUN
fuelectenerg-900	45	56	–	–	PUNCT
fuelectenerg-900	45	57	1	1	NUM
fuelectenerg-900	45	58	ghz	ghz	NOUN
fuelectenerg-900	45	59	)	)	PUNCT
fuelectenerg-900	45	60	.	.	PUNCT
fuelectenerg-900	46	1	the	the	DET
fuelectenerg-900	46	2	quality	quality	NOUN
fuelectenerg-900	46	3	factor	factor	NOUN
fuelectenerg-900	46	4	of	of	ADP
fuelectenerg-900	46	5	a	a	DET
fuelectenerg-900	46	6	vcos	vcos	PROPN
fuelectenerg-900	46	7	resonant	resonant	NOUN
fuelectenerg-900	46	8	tank	tank	NOUN
fuelectenerg-900	46	9	in	in	ADP
fuelectenerg-900	46	10	a	a	DET
fuelectenerg-900	46	11	superheterodyne	superheterodyne	NOUN
fuelectenerg-900	46	12	receiver	receiver	NOUN
fuelectenerg-900	46	13	can	can	AUX
fuelectenerg-900	46	14	be	be	AUX
fuelectenerg-900	46	15	30–50	30–50	NUM
fuelectenerg-900	46	16	,	,	PUNCT
fuelectenerg-900	46	17	but	but	CCONJ
fuelectenerg-900	46	18	q	q	NOUN
fuelectenerg-900	46	19	of	of	ADP
fuelectenerg-900	46	20	rf	rf	NOUN
fuelectenerg-900	46	21	bandpass	bandpass	NOUN
fuelectenerg-900	46	22	filters	filter	NOUN
fuelectenerg-900	46	23	,	,	PUNCT
fuelectenerg-900	46	24	with	with	ADP
fuelectenerg-900	46	25	the	the	DET
fuelectenerg-900	46	26	central	central	ADJ
fuelectenerg-900	46	27	frequencies	frequency	NOUN
fuelectenerg-900	46	28	in	in	ADP
fuelectenerg-900	46	29	the	the	DET
fuelectenerg-900	46	30	range	range	NOUN
fuelectenerg-900	46	31	0.8	0.8	NUM
fuelectenerg-900	46	32	–	–	PUNCT
fuelectenerg-900	46	33	5.5	5.5	NUM
fuelectenerg-900	46	34	ghz	ghz	NOUN
fuelectenerg-900	46	35	,	,	PUNCT
fuelectenerg-900	46	36	must	must	AUX
fuelectenerg-900	46	37	be	be	AUX
fuelectenerg-900	46	38	much	much	ADV
fuelectenerg-900	46	39	greater	great	ADJ
fuelectenerg-900	46	40	(	(	PUNCT
fuelectenerg-900	46	41	q~500–10000	q~500–10000	NUM
fuelectenerg-900	46	42	)	)	PUNCT
fuelectenerg-900	46	43	.	.	PUNCT
fuelectenerg-900	47	1	the	the	DET
fuelectenerg-900	47	2	highest	high	ADJ
fuelectenerg-900	47	3	q	q	NOUN
fuelectenerg-900	47	4	(	(	PUNCT
fuelectenerg-900	47	5	typically	typically	ADV
fuelectenerg-900	47	6	greater	great	ADJ
fuelectenerg-900	47	7	than	than	ADP
fuelectenerg-900	47	8	10	10	NUM
fuelectenerg-900	47	9	5	5	NUM
fuelectenerg-900	47	10	,	,	PUNCT
fuelectenerg-900	47	11	even	even	ADV
fuelectenerg-900	47	12	10	10	NUM
fuelectenerg-900	47	13	6	6	NUM
fuelectenerg-900	47	14	)	)	PUNCT
fuelectenerg-900	47	15	is	be	AUX
fuelectenerg-900	47	16	required	require	VERB
fuelectenerg-900	47	17	in	in	ADP
fuelectenerg-900	47	18	frequency	frequency	NOUN
fuelectenerg-900	47	19	references	reference	NOUN
fuelectenerg-900	47	20	(	(	PUNCT
fuelectenerg-900	47	21	oscillators	oscillator	NOUN
fuelectenerg-900	47	22	)	)	PUNCT
fuelectenerg-900	47	23	.	.	PUNCT
fuelectenerg-900	48	1	the	the	DET
fuelectenerg-900	48	2	temperature	temperature	NOUN
fuelectenerg-900	48	3	frequency	frequency	NOUN
fuelectenerg-900	48	4	stability	stability	NOUN
fuelectenerg-900	48	5	of	of	ADP
fuelectenerg-900	48	6	frequency	frequency	NOUN
fuelectenerg-900	48	7	references	reference	NOUN
fuelectenerg-900	48	8	in	in	ADP
fuelectenerg-900	48	9	mobile	mobile	ADJ
fuelectenerg-900	48	10	terminals	terminal	NOUN
fuelectenerg-900	48	11	should	should	AUX
fuelectenerg-900	48	12	be	be	AUX
fuelectenerg-900	48	13	better	well	ADJ
fuelectenerg-900	48	14	than	than	SCONJ
fuelectenerg-900	48	15	±10	±10	VERB
fuelectenerg-900	48	16	ppm	ppm	VERB
fuelectenerg-900	48	17	in	in	ADP
fuelectenerg-900	48	18	the	the	DET
fuelectenerg-900	48	19	range	range	NOUN
fuelectenerg-900	48	20	0–70	0–70	PROPN
fuelectenerg-900	48	21	ºc	ºc	PROPN
fuelectenerg-900	49	1	[	[	X
fuelectenerg-900	49	2	2	2	NUM
fuelectenerg-900	49	3	]	]	PUNCT
fuelectenerg-900	49	4	.	.	PUNCT
fuelectenerg-900	50	1	the	the	DET
fuelectenerg-900	50	2	maximal	maximal	ADJ
fuelectenerg-900	50	3	acceptable	acceptable	ADJ
fuelectenerg-900	50	4	resonator	resonator	NOUN
fuelectenerg-900	50	5	frequency	frequency	NOUN
fuelectenerg-900	50	6	variation	variation	NOUN
fuelectenerg-900	50	7	for	for	ADP
fuelectenerg-900	50	8	frequency	frequency	NOUN
fuelectenerg-900	50	9	synthesis	synthesis	NOUN
fuelectenerg-900	50	10	is	be	AUX
fuelectenerg-900	50	11	±2	±2	ADJ
fuelectenerg-900	50	12	ppm	ppm	NOUN
fuelectenerg-900	50	13	in	in	ADP
fuelectenerg-900	50	14	the	the	DET
fuelectenerg-900	50	15	same	same	ADJ
fuelectenerg-900	50	16	temperature	temperature	NOUN
fuelectenerg-900	50	17	range	range	NOUN
fuelectenerg-900	50	18	.	.	PUNCT
fuelectenerg-900	51	1	in	in	ADP
fuelectenerg-900	51	2	rf	rf	ADJ
fuelectenerg-900	51	3	preselect	preselect	NOUN
fuelectenerg-900	51	4	filters	filter	NOUN
fuelectenerg-900	51	5	and	and	CCONJ
fuelectenerg-900	51	6	imagerejection	imagerejection	NOUN
fuelectenerg-900	51	7	filters	filter	VERB
fuelectenerg-900	51	8	the	the	DET
fuelectenerg-900	51	9	maximum	maximum	ADJ
fuelectenerg-900	51	10	temperature	temperature	NOUN
fuelectenerg-900	51	11	coefficient	coefficient	NOUN
fuelectenerg-900	51	12	of	of	ADP
fuelectenerg-900	51	13	frequency	frequency	NOUN
fuelectenerg-900	51	14	can	can	AUX
fuelectenerg-900	51	15	be	be	AUX
fuelectenerg-900	51	16	~10	~10	X
fuelectenerg-900	52	1	ppm/ºc	ppm/ºc	PROPN
fuelectenerg-900	52	2	.	.	PUNCT
fuelectenerg-900	53	1	the	the	DET
fuelectenerg-900	53	2	resonator	resonator	NOUN
fuelectenerg-900	53	3	long	long	ADJ
fuelectenerg-900	53	4	-	-	PUNCT
fuelectenerg-900	53	5	term	term	NOUN
fuelectenerg-900	53	6	frequency	frequency	NOUN
fuelectenerg-900	53	7	stability	stability	NOUN
fuelectenerg-900	53	8	better	well	ADJ
fuelectenerg-900	53	9	than	than	SCONJ
fuelectenerg-900	53	10	3	3	NUM
fuelectenerg-900	53	11	ppm	ppm	NOUN
fuelectenerg-900	53	12	/	/	SYM
fuelectenerg-900	53	13	year	year	NOUN
fuelectenerg-900	53	14	is	be	AUX
fuelectenerg-900	53	15	needed	need	VERB
fuelectenerg-900	53	16	[	[	PUNCT
fuelectenerg-900	53	17	4	4	NUM
fuelectenerg-900	53	18	]	]	PUNCT
fuelectenerg-900	53	19	.	.	PUNCT
fuelectenerg-900	54	1	the	the	DET
fuelectenerg-900	54	2	resistance	resistance	NOUN
fuelectenerg-900	54	3	should	should	AUX
fuelectenerg-900	54	4	be	be	AUX
fuelectenerg-900	54	5	low	low	ADJ
fuelectenerg-900	54	6	enough	enough	ADV
fuelectenerg-900	54	7	to	to	PART
fuelectenerg-900	54	8	allow	allow	VERB
fuelectenerg-900	54	9	impedance	impedance	NOUN
fuelectenerg-900	54	10	matching	matching	NOUN
fuelectenerg-900	54	11	to	to	ADP
fuelectenerg-900	54	12	conventional	conventional	ADJ
fuelectenerg-900	54	13	rf	rf	ADJ
fuelectenerg-900	54	14	circuits	circuit	NOUN
fuelectenerg-900	54	15	(	(	PUNCT
fuelectenerg-900	54	16	typically	typically	ADV
fuelectenerg-900	54	17	50	50	NUM
fuelectenerg-900	54	18	ω	ω	NUM
fuelectenerg-900	54	19	)	)	PUNCT
fuelectenerg-900	54	20	.	.	PUNCT
fuelectenerg-900	55	1	fig	fig	NOUN
fuelectenerg-900	55	2	.	.	PUNCT
fuelectenerg-900	56	1	1	1	NUM
fuelectenerg-900	56	2	simplified	simplified	ADJ
fuelectenerg-900	56	3	block	block	NOUN
fuelectenerg-900	56	4	-	-	PUNCT
fuelectenerg-900	56	5	diagram	diagram	NOUN
fuelectenerg-900	56	6	of	of	ADP
fuelectenerg-900	56	7	a	a	DET
fuelectenerg-900	56	8	hypothetical	hypothetical	ADJ
fuelectenerg-900	56	9	multiband	multiband	NOUN
fuelectenerg-900	56	10	multistandard	multistandard	NOUN
fuelectenerg-900	56	11	wireless	wireless	ADJ
fuelectenerg-900	56	12	transceiver	transceiver	NOUN
fuelectenerg-900	56	13	rf	rf	PROPN
fuelectenerg-900	56	14	front	front	ADJ
fuelectenerg-900	56	15	end	end	NOUN
fuelectenerg-900	56	16	,	,	PUNCT
fuelectenerg-900	56	17	illustrating	illustrate	VERB
fuelectenerg-900	56	18	applications	application	NOUN
fuelectenerg-900	56	19	of	of	ADP
fuelectenerg-900	56	20	rf	rf	NOUN
fuelectenerg-900	56	21	mems	mem	NOUN
fuelectenerg-900	56	22	components	component	NOUN
fuelectenerg-900	56	23	(	(	PUNCT
fuelectenerg-900	56	24	shown	show	VERB
fuelectenerg-900	56	25	in	in	ADP
fuelectenerg-900	56	26	color	color	NOUN
fuelectenerg-900	56	27	/	/	SYM
fuelectenerg-900	56	28	gray	gray	ADJ
fuelectenerg-900	56	29	):	):	PUNCT
fuelectenerg-900	56	30	a	a	X
fuelectenerg-900	56	31	)	)	PUNCT
fuelectenerg-900	56	32	direct	direct	ADJ
fuelectenerg-900	56	33	replacement	replacement	NOUN
fuelectenerg-900	56	34	of	of	ADP
fuelectenerg-900	56	35	non	non	ADJ
fuelectenerg-900	56	36	-	-	ADJ
fuelectenerg-900	56	37	integrated	integrated	ADJ
fuelectenerg-900	56	38	conventional	conventional	ADJ
fuelectenerg-900	56	39	components	component	NOUN
fuelectenerg-900	56	40	with	with	ADP
fuelectenerg-900	56	41	integrated	integrate	VERB
fuelectenerg-900	56	42	mems	mem	NOUN
fuelectenerg-900	56	43	components	component	NOUN
fuelectenerg-900	56	44	,	,	PUNCT
fuelectenerg-900	56	45	b	b	NOUN
fuelectenerg-900	56	46	)	)	PUNCT
fuelectenerg-900	56	47	significantly	significantly	ADV
fuelectenerg-900	56	48	simplified	simplify	VERB
fuelectenerg-900	56	49	rf	rf	ADJ
fuelectenerg-900	56	50	front	front	ADJ
fuelectenerg-900	56	51	end	end	NOUN
fuelectenerg-900	56	52	as	as	ADP
fuelectenerg-900	56	53	a	a	DET
fuelectenerg-900	56	54	result	result	NOUN
fuelectenerg-900	56	55	of	of	ADP
fuelectenerg-900	56	56	the	the	DET
fuelectenerg-900	56	57	application	application	NOUN
fuelectenerg-900	56	58	of	of	ADP
fuelectenerg-900	56	59	tunable	tunable	ADJ
fuelectenerg-900	56	60	mems	mem	NOUN
fuelectenerg-900	56	61	components	component	NOUN
fuelectenerg-900	56	62	.	.	PUNCT
fuelectenerg-900	57	1	resonators	resonator	NOUN
fuelectenerg-900	57	2	can	can	AUX
fuelectenerg-900	57	3	generally	generally	ADV
fuelectenerg-900	57	4	be	be	AUX
fuelectenerg-900	57	5	divided	divide	VERB
fuelectenerg-900	57	6	into	into	ADP
fuelectenerg-900	57	7	electromagnetic	electromagnetic	ADJ
fuelectenerg-900	57	8	and	and	CCONJ
fuelectenerg-900	57	9	electromechanical	electromechanical	ADJ
fuelectenerg-900	57	10	.	.	PUNCT
fuelectenerg-900	58	1	in	in	ADP
fuelectenerg-900	58	2	modern	modern	ADJ
fuelectenerg-900	58	3	wireless	wireless	ADJ
fuelectenerg-900	58	4	transceivers	transceiver	NOUN
fuelectenerg-900	58	5	,	,	PUNCT
fuelectenerg-900	58	6	electromagnetic	electromagnetic	ADJ
fuelectenerg-900	58	7	resonators	resonator	NOUN
fuelectenerg-900	58	8	are	be	AUX
fuelectenerg-900	58	9	lc	lc	NOUN
fuelectenerg-900	58	10	circuits	circuit	NOUN
fuelectenerg-900	58	11	,	,	PUNCT
fuelectenerg-900	58	12	while	while	SCONJ
fuelectenerg-900	58	13	electromechanical	electromechanical	ADJ
fuelectenerg-900	58	14	ones	one	NOUN
fuelectenerg-900	58	15	include	include	VERB
fuelectenerg-900	58	16	saw	see	VERB
fuelectenerg-900	58	17	(	(	PUNCT
fuelectenerg-900	58	18	surface	surface	NOUN
fuelectenerg-900	58	19	acoustic	acoustic	ADJ
fuelectenerg-900	58	20	wave	wave	NOUN
fuelectenerg-900	58	21	)	)	PUNCT
fuelectenerg-900	58	22	and	and	CCONJ
fuelectenerg-900	58	23	baw	baw	PROPN
fuelectenerg-900	58	24	(	(	PUNCT
fuelectenerg-900	58	25	bulk	bulk	ADJ
fuelectenerg-900	58	26	acoustic	acoustic	ADJ
fuelectenerg-900	58	27	wave	wave	NOUN
fuelectenerg-900	58	28	)	)	PUNCT
fuelectenerg-900	58	29	resonators	resonator	NOUN
fuelectenerg-900	58	30	.	.	PUNCT
fuelectenerg-900	59	1	saw	saw	NOUN
fuelectenerg-900	59	2	and	and	CCONJ
fuelectenerg-900	59	3	baw	baw	PROPN
fuelectenerg-900	59	4	resonators	resonator	NOUN
fuelectenerg-900	59	5	(	(	PUNCT
fuelectenerg-900	59	6	which	which	PRON
fuelectenerg-900	59	7	also	also	ADV
fuelectenerg-900	59	8	include	include	VERB
fuelectenerg-900	59	9	quartz	quartz	NOUN
fuelectenerg-900	59	10	resonators	resonator	NOUN
fuelectenerg-900	59	11	)	)	PUNCT
fuelectenerg-900	59	12	are	be	AUX
fuelectenerg-900	59	13	off	off	ADP
fuelectenerg-900	59	14	-	-	PUNCT
fuelectenerg-900	59	15	chip	chip	NOUN
fuelectenerg-900	59	16	components	component	NOUN
fuelectenerg-900	59	17	,	,	PUNCT
fuelectenerg-900	59	18	and	and	CCONJ
fuelectenerg-900	59	19	have	have	VERB
fuelectenerg-900	59	20	better	well	ADJ
fuelectenerg-900	59	21	performance	performance	NOUN
fuelectenerg-900	59	22	than	than	ADP
fuelectenerg-900	59	23	electromagnetic	electromagnetic	ADJ
fuelectenerg-900	59	24	ones	one	NOUN
fuelectenerg-900	59	25	,	,	PUNCT
fuelectenerg-900	59	26	especially	especially	ADV
fuelectenerg-900	59	27	than	than	ADP
fuelectenerg-900	59	28	integrated	integrated	ADJ
fuelectenerg-900	59	29	ones	one	NOUN
fuelectenerg-900	59	30	.	.	PUNCT
fuelectenerg-900	60	1	saw	see	VERB
fuelectenerg-900	60	2	resonators	resonator	NOUN
fuelectenerg-900	60	3	are	be	AUX
fuelectenerg-900	60	4	used	use	VERB
fuelectenerg-900	60	5	in	in	ADP
fuelectenerg-900	60	6	high	high	ADJ
fuelectenerg-900	60	7	-	-	PUNCT
fuelectenerg-900	60	8	performance	performance	NOUN
fuelectenerg-900	60	9	rf	rf	NOUN
fuelectenerg-900	60	10	filters	filter	NOUN
fuelectenerg-900	60	11	and	and	CCONJ
fuelectenerg-900	60	12	duplexers	duplexer	NOUN
fuelectenerg-900	60	13	,	,	PUNCT
fuelectenerg-900	60	14	with	with	ADP
fuelectenerg-900	60	15	central	central	ADJ
fuelectenerg-900	60	16	frequencies	frequency	NOUN
fuelectenerg-900	60	17	up	up	ADP
fuelectenerg-900	60	18	to	to	PART
fuelectenerg-900	60	19	2	2	NUM
fuelectenerg-900	60	20	ghz	ghz	NOUN
fuelectenerg-900	60	21	.	.	PUNCT
fuelectenerg-900	61	1	the	the	DET
fuelectenerg-900	61	2	nominal	nominal	ADJ
fuelectenerg-900	61	3	frequencies	frequency	NOUN
fuelectenerg-900	61	4	of	of	ADP
fuelectenerg-900	61	5	crystal	crystal	NOUN
fuelectenerg-900	61	6	resonators	resonator	NOUN
fuelectenerg-900	61	7	are	be	AUX
fuelectenerg-900	61	8	of	of	ADP
fuelectenerg-900	61	9	the	the	DET
fuelectenerg-900	61	10	order	order	NOUN
fuelectenerg-900	61	11	of	of	ADP
fuelectenerg-900	61	12	10	10	NUM
fuelectenerg-900	61	13	khz–10	khz–10	NOUN
fuelectenerg-900	61	14	mhz	mhz	NOUN
fuelectenerg-900	61	15	.	.	PUNCT
fuelectenerg-900	62	1	with	with	ADP
fuelectenerg-900	62	2	the	the	DET
fuelectenerg-900	62	3	increase	increase	NOUN
fuelectenerg-900	62	4	in	in	ADP
fuelectenerg-900	62	5	the	the	DET
fuelectenerg-900	62	6	resonance	resonance	NOUN
fuelectenerg-900	62	7	frequency	frequency	NOUN
fuelectenerg-900	62	8	rf	rf	NOUN
fuelectenerg-900	62	9	mems	mem	NOUN
fuelectenerg-900	62	10	/	/	SYM
fuelectenerg-900	62	11	nems	nem	NOUN
fuelectenerg-900	62	12	resonators	resonator	NOUN
fuelectenerg-900	62	13	for	for	ADP
fuelectenerg-900	62	14	wireless	wireless	ADJ
fuelectenerg-900	62	15	communication	communication	NOUN
fuelectenerg-900	62	16	systems	system	NOUN
fuelectenerg-900	62	17	and	and	CCONJ
fuelectenerg-900	62	18	adsorption	adsorption	NOUN
fuelectenerg-900	62	19	-	-	PUNCT
fuelectenerg-900	62	20	desorption	desorption	NOUN
fuelectenerg-900	62	21	phase	phase	NOUN
fuelectenerg-900	62	22	noise	noise	NOUN
fuelectenerg-900	62	23	349	349	NUM
fuelectenerg-900	62	24	of	of	ADP
fuelectenerg-900	62	25	quartz	quartz	NOUN
fuelectenerg-900	62	26	resonators	resonator	NOUN
fuelectenerg-900	62	27	,	,	PUNCT
fuelectenerg-900	62	28	the	the	DET
fuelectenerg-900	62	29	value	value	NOUN
fuelectenerg-900	62	30	of	of	ADP
fuelectenerg-900	62	31	the	the	DET
fuelectenerg-900	62	32	q	q	NOUN
fuelectenerg-900	62	33	factor	factor	NOUN
fuelectenerg-900	62	34	decreases	decrease	VERB
fuelectenerg-900	62	35	.	.	PUNCT
fuelectenerg-900	63	1	the	the	DET
fuelectenerg-900	63	2	best	good	ADJ
fuelectenerg-900	63	3	quartz	quartz	NOUN
fuelectenerg-900	63	4	resonators	resonator	NOUN
fuelectenerg-900	63	5	(	(	PUNCT
fuelectenerg-900	63	6	whose	whose	DET
fuelectenerg-900	63	7	production	production	NOUN
fuelectenerg-900	63	8	is	be	AUX
fuelectenerg-900	63	9	complex	complex	ADJ
fuelectenerg-900	63	10	and	and	CCONJ
fuelectenerg-900	63	11	expensive	expensive	ADJ
fuelectenerg-900	63	12	)	)	PUNCT
fuelectenerg-900	63	13	with	with	ADP
fuelectenerg-900	63	14	a	a	DET
fuelectenerg-900	63	15	frequency	frequency	NOUN
fuelectenerg-900	63	16	of	of	ADP
fuelectenerg-900	63	17	10	10	NUM
fuelectenerg-900	63	18	mhz	mhz	NOUN
fuelectenerg-900	63	19	have	have	VERB
fuelectenerg-900	63	20	q=10	q=10	NOUN
fuelectenerg-900	63	21	6	6	NUM
fuelectenerg-900	63	22	.	.	PUNCT
fuelectenerg-900	64	1	the	the	DET
fuelectenerg-900	64	2	series	series	PROPN
fuelectenerg-900	64	3	resistance	resistance	NOUN
fuelectenerg-900	64	4	of	of	ADP
fuelectenerg-900	64	5	quartz	quartz	NOUN
fuelectenerg-900	64	6	resonators	resonator	NOUN
fuelectenerg-900	64	7	is	be	AUX
fuelectenerg-900	64	8	50	50	NUM
fuelectenerg-900	64	9			NOUN
fuelectenerg-900	64	10	,	,	PUNCT
fuelectenerg-900	64	11	whereas	whereas	SCONJ
fuelectenerg-900	64	12	the	the	DET
fuelectenerg-900	64	13	frequency	frequency	NOUN
fuelectenerg-900	64	14	stability	stability	NOUN
fuelectenerg-900	64	15	,	,	PUNCT
fuelectenerg-900	64	16	at	at	ADP
fuelectenerg-900	64	17	best	good	ADJ
fuelectenerg-900	64	18	1	1	NUM
fuelectenerg-900	64	19	ppm	ppm	NOUN
fuelectenerg-900	64	20	,	,	PUNCT
fuelectenerg-900	64	21	in	in	ADP
fuelectenerg-900	64	22	the	the	DET
fuelectenerg-900	64	23	temperature	temperature	NOUN
fuelectenerg-900	64	24	range	range	NOUN
fuelectenerg-900	64	25	of	of	ADP
fuelectenerg-900	64	26	100c	100c	NUM
fuelectenerg-900	64	27	may	may	AUX
fuelectenerg-900	64	28	be	be	AUX
fuelectenerg-900	64	29	achieved	achieve	VERB
fuelectenerg-900	64	30	by	by	ADP
fuelectenerg-900	64	31	choosing	choose	VERB
fuelectenerg-900	64	32	the	the	DET
fuelectenerg-900	64	33	optimum	optimum	ADJ
fuelectenerg-900	64	34	oscillating	oscillate	VERB
fuelectenerg-900	64	35	mode	mode	NOUN
fuelectenerg-900	64	36	and	and	CCONJ
fuelectenerg-900	64	37	crystal	crystal	NOUN
fuelectenerg-900	64	38	cut	cut	NOUN
fuelectenerg-900	64	39	.	.	PUNCT
fuelectenerg-900	65	1	conventional	conventional	ADJ
fuelectenerg-900	65	2	resonators	resonator	NOUN
fuelectenerg-900	65	3	are	be	AUX
fuelectenerg-900	65	4	highly	highly	ADV
fuelectenerg-900	65	5	reliable	reliable	ADJ
fuelectenerg-900	65	6	and	and	CCONJ
fuelectenerg-900	65	7	technologically	technologically	ADV
fuelectenerg-900	65	8	mature	mature	ADJ
fuelectenerg-900	65	9	,	,	PUNCT
fuelectenerg-900	65	10	but	but	CCONJ
fuelectenerg-900	65	11	none	none	NOUN
fuelectenerg-900	65	12	of	of	ADP
fuelectenerg-900	65	13	the	the	DET
fuelectenerg-900	65	14	mentioned	mention	VERB
fuelectenerg-900	65	15	resonator	resonator	NOUN
fuelectenerg-900	65	16	types	type	NOUN
fuelectenerg-900	65	17	can	can	AUX
fuelectenerg-900	65	18	simultaneously	simultaneously	ADV
fuelectenerg-900	65	19	meet	meet	VERB
fuelectenerg-900	65	20	the	the	DET
fuelectenerg-900	65	21	following	follow	VERB
fuelectenerg-900	65	22	requirements	requirement	NOUN
fuelectenerg-900	65	23	:	:	PUNCT
fuelectenerg-900	65	24	resonance	resonance	NOUN
fuelectenerg-900	65	25	frequencies	frequency	NOUN
fuelectenerg-900	65	26	in	in	ADP
fuelectenerg-900	65	27	ghz	ghz	NOUN
fuelectenerg-900	65	28	-	-	PUNCT
fuelectenerg-900	65	29	range	range	NOUN
fuelectenerg-900	65	30	,	,	PUNCT
fuelectenerg-900	65	31	high	high	ADJ
fuelectenerg-900	65	32	q	q	NOUN
fuelectenerg-900	65	33	at	at	ADP
fuelectenerg-900	65	34	ghzfrequencies	ghzfrequencie	NOUN
fuelectenerg-900	65	35	,	,	PUNCT
fuelectenerg-900	65	36	tunability	tunability	NOUN
fuelectenerg-900	65	37	,	,	PUNCT
fuelectenerg-900	65	38	low	low	ADJ
fuelectenerg-900	65	39	power	power	NOUN
fuelectenerg-900	65	40	consumption	consumption	NOUN
fuelectenerg-900	65	41	,	,	PUNCT
fuelectenerg-900	65	42	high	high	ADJ
fuelectenerg-900	65	43	frequency	frequency	NOUN
fuelectenerg-900	65	44	stability	stability	NOUN
fuelectenerg-900	65	45	,	,	PUNCT
fuelectenerg-900	65	46	small	small	ADJ
fuelectenerg-900	65	47	dimensions	dimension	NOUN
fuelectenerg-900	65	48	,	,	PUNCT
fuelectenerg-900	65	49	low	low	ADJ
fuelectenerg-900	65	50	cost	cost	NOUN
fuelectenerg-900	65	51	and	and	CCONJ
fuelectenerg-900	65	52	integration	integration	NOUN
fuelectenerg-900	65	53	(	(	PUNCT
fuelectenerg-900	65	54	especially	especially	ADV
fuelectenerg-900	65	55	monolithic	monolithic	ADJ
fuelectenerg-900	65	56	)	)	PUNCT
fuelectenerg-900	65	57	with	with	ADP
fuelectenerg-900	65	58	cmos	cmos	ADJ
fuelectenerg-900	65	59	circuits	circuit	NOUN
fuelectenerg-900	65	60	.	.	PUNCT
fuelectenerg-900	66	1	therefore	therefore	ADV
fuelectenerg-900	66	2	,	,	PUNCT
fuelectenerg-900	66	3	they	they	PRON
fuelectenerg-900	66	4	are	be	AUX
fuelectenerg-900	66	5	an	an	DET
fuelectenerg-900	66	6	obstacle	obstacle	NOUN
fuelectenerg-900	66	7	for	for	ADP
fuelectenerg-900	66	8	full	full	ADJ
fuelectenerg-900	66	9	integration	integration	NOUN
fuelectenerg-900	66	10	and	and	CCONJ
fuelectenerg-900	66	11	miniaturization	miniaturization	NOUN
fuelectenerg-900	66	12	of	of	ADP
fuelectenerg-900	66	13	ghz	ghz	NOUN
fuelectenerg-900	66	14	multiband	multiband	NOUN
fuelectenerg-900	66	15	multistandard	multistandard	VERB
fuelectenerg-900	66	16	wireless	wireless	ADJ
fuelectenerg-900	66	17	transceivers	transceiver	NOUN
fuelectenerg-900	66	18	.	.	PUNCT
fuelectenerg-900	67	1	during	during	ADP
fuelectenerg-900	67	2	the	the	DET
fuelectenerg-900	67	3	past	past	ADJ
fuelectenerg-900	67	4	two	two	NUM
fuelectenerg-900	67	5	decades	decade	NOUN
fuelectenerg-900	67	6	a	a	DET
fuelectenerg-900	67	7	considerable	considerable	ADJ
fuelectenerg-900	67	8	effort	effort	NOUN
fuelectenerg-900	67	9	has	have	AUX
fuelectenerg-900	67	10	been	be	AUX
fuelectenerg-900	67	11	made	make	VERB
fuelectenerg-900	67	12	in	in	ADP
fuelectenerg-900	67	13	the	the	DET
fuelectenerg-900	67	14	development	development	NOUN
fuelectenerg-900	67	15	of	of	ADP
fuelectenerg-900	67	16	rf	rf	NOUN
fuelectenerg-900	67	17	mems	mem	NOUN
fuelectenerg-900	67	18	resonators	resonator	NOUN
fuelectenerg-900	67	19	in	in	ADP
fuelectenerg-900	67	20	order	order	NOUN
fuelectenerg-900	67	21	for	for	SCONJ
fuelectenerg-900	67	22	them	they	PRON
fuelectenerg-900	67	23	to	to	PART
fuelectenerg-900	67	24	be	be	AUX
fuelectenerg-900	67	25	used	use	VERB
fuelectenerg-900	67	26	in	in	ADP
fuelectenerg-900	67	27	wireless	wireless	ADJ
fuelectenerg-900	67	28	transceivers	transceiver	NOUN
fuelectenerg-900	67	29	instead	instead	ADV
fuelectenerg-900	67	30	of	of	ADP
fuelectenerg-900	67	31	conventional	conventional	ADJ
fuelectenerg-900	67	32	bulky	bulky	ADJ
fuelectenerg-900	67	33	off	off	ADP
fuelectenerg-900	67	34	-	-	PUNCT
fuelectenerg-900	67	35	chip	chip	NOUN
fuelectenerg-900	67	36	resonators	resonator	NOUN
fuelectenerg-900	67	37	[	[	X
fuelectenerg-900	67	38	1	1	NUM
fuelectenerg-900	67	39	-	-	SYM
fuelectenerg-900	67	40	4	4	NUM
fuelectenerg-900	67	41	]	]	PUNCT
fuelectenerg-900	67	42	.	.	PUNCT
fuelectenerg-900	68	1	both	both	PRON
fuelectenerg-900	68	2	electromagnetic	electromagnetic	ADJ
fuelectenerg-900	68	3	and	and	CCONJ
fuelectenerg-900	68	4	electromechanical	electromechanical	ADJ
fuelectenerg-900	68	5	resonators	resonator	NOUN
fuelectenerg-900	68	6	have	have	AUX
fuelectenerg-900	68	7	been	be	AUX
fuelectenerg-900	68	8	fabricated	fabricate	VERB
fuelectenerg-900	68	9	using	use	VERB
fuelectenerg-900	68	10	the	the	DET
fuelectenerg-900	68	11	mems	mem	NOUN
fuelectenerg-900	68	12	technology	technology	NOUN
fuelectenerg-900	68	13	.	.	PUNCT
fuelectenerg-900	69	1	as	as	ADV
fuelectenerg-900	69	2	far	far	ADV
fuelectenerg-900	69	3	as	as	SCONJ
fuelectenerg-900	69	4	mems	mems	ADJ
fuelectenerg-900	69	5	resonators	resonator	NOUN
fuelectenerg-900	69	6	of	of	ADP
fuelectenerg-900	69	7	these	these	DET
fuelectenerg-900	69	8	two	two	NUM
fuelectenerg-900	69	9	types	type	NOUN
fuelectenerg-900	69	10	with	with	ADP
fuelectenerg-900	69	11	equal	equal	ADJ
fuelectenerg-900	69	12	resonance	resonance	NOUN
fuelectenerg-900	69	13	frequency	frequency	NOUN
fuelectenerg-900	69	14	are	be	AUX
fuelectenerg-900	69	15	concerned	concern	VERB
fuelectenerg-900	69	16	,	,	PUNCT
fuelectenerg-900	69	17	mems	mem	VERB
fuelectenerg-900	69	18	electromechanical	electromechanical	ADJ
fuelectenerg-900	69	19	resonators	resonator	NOUN
fuelectenerg-900	69	20	are	be	AUX
fuelectenerg-900	69	21	smaller	small	ADJ
fuelectenerg-900	69	22	and	and	CCONJ
fuelectenerg-900	69	23	have	have	VERB
fuelectenerg-900	69	24	a	a	DET
fuelectenerg-900	69	25	higher	high	ADJ
fuelectenerg-900	69	26	quality	quality	NOUN
fuelectenerg-900	69	27	factor	factor	NOUN
fuelectenerg-900	69	28	than	than	ADP
fuelectenerg-900	69	29	electromagnetic	electromagnetic	ADJ
fuelectenerg-900	69	30	ones	one	NOUN
fuelectenerg-900	69	31	.	.	PUNCT
fuelectenerg-900	70	1	in	in	ADP
fuelectenerg-900	70	2	the	the	DET
fuelectenerg-900	70	3	following	follow	VERB
fuelectenerg-900	70	4	text	text	NOUN
fuelectenerg-900	70	5	we	we	PRON
fuelectenerg-900	70	6	will	will	AUX
fuelectenerg-900	70	7	present	present	VERB
fuelectenerg-900	70	8	electromechanical	electromechanical	ADJ
fuelectenerg-900	70	9	(	(	PUNCT
fuelectenerg-900	70	10	em	em	NOUN
fuelectenerg-900	70	11	)	)	PUNCT
fuelectenerg-900	70	12	rf	rf	NOUN
fuelectenerg-900	70	13	mems	mem	NOUN
fuelectenerg-900	70	14	resonators	resonator	NOUN
fuelectenerg-900	70	15	in	in	ADP
fuelectenerg-900	70	16	greater	great	ADJ
fuelectenerg-900	70	17	detail	detail	NOUN
fuelectenerg-900	70	18	.	.	PUNCT
fuelectenerg-900	71	1	some	some	PRON
fuelectenerg-900	71	2	of	of	ADP
fuelectenerg-900	71	3	the	the	DET
fuelectenerg-900	71	4	main	main	ADJ
fuelectenerg-900	71	5	advantages	advantage	NOUN
fuelectenerg-900	71	6	that	that	PRON
fuelectenerg-900	71	7	mems	mem	NOUN
fuelectenerg-900	71	8	technologies	technology	NOUN
fuelectenerg-900	71	9	bring	bring	VERB
fuelectenerg-900	71	10	into	into	ADP
fuelectenerg-900	71	11	the	the	DET
fuelectenerg-900	71	12	field	field	NOUN
fuelectenerg-900	71	13	of	of	ADP
fuelectenerg-900	71	14	em	em	PRON
fuelectenerg-900	71	15	resonators	resonator	NOUN
fuelectenerg-900	71	16	include	include	VERB
fuelectenerg-900	71	17	small	small	ADJ
fuelectenerg-900	71	18	dimensions	dimension	NOUN
fuelectenerg-900	71	19	,	,	PUNCT
fuelectenerg-900	71	20	high	high	ADJ
fuelectenerg-900	71	21	both	both	CCONJ
fuelectenerg-900	71	22	f0	f0	ADJ
fuelectenerg-900	71	23	and	and	CCONJ
fuelectenerg-900	71	24	f0·q	f0·q	NOUN
fuelectenerg-900	71	25	product	product	NOUN
fuelectenerg-900	71	26	(	(	PUNCT
fuelectenerg-900	71	27	f0	f0	PROPN
fuelectenerg-900	71	28	up	up	ADP
fuelectenerg-900	71	29	to	to	ADP
fuelectenerg-900	71	30	the	the	DET
fuelectenerg-900	71	31	order	order	NOUN
fuelectenerg-900	71	32	of	of	ADP
fuelectenerg-900	71	33	1	1	NUM
fuelectenerg-900	71	34	ghz	ghz	NOUN
fuelectenerg-900	71	35	,	,	PUNCT
fuelectenerg-900	71	36	q	q	X
fuelectenerg-900	71	37	comparable	comparable	ADJ
fuelectenerg-900	71	38	to	to	ADP
fuelectenerg-900	71	39	conventional	conventional	ADJ
fuelectenerg-900	71	40	)	)	PUNCT
fuelectenerg-900	71	41	,	,	PUNCT
fuelectenerg-900	71	42	low	low	ADJ
fuelectenerg-900	71	43	power	power	NOUN
fuelectenerg-900	71	44	consumption	consumption	NOUN
fuelectenerg-900	71	45	,	,	PUNCT
fuelectenerg-900	71	46	the	the	DET
fuelectenerg-900	71	47	possibility	possibility	NOUN
fuelectenerg-900	71	48	of	of	ADP
fuelectenerg-900	71	49	lowcost	lowcost	PROPN
fuelectenerg-900	71	50	mass	mass	PROPN
fuelectenerg-900	71	51	production	production	NOUN
fuelectenerg-900	71	52	and	and	CCONJ
fuelectenerg-900	71	53	integration	integration	NOUN
fuelectenerg-900	71	54	(	(	PUNCT
fuelectenerg-900	71	55	monolithic	monolithic	ADJ
fuelectenerg-900	71	56	or	or	CCONJ
fuelectenerg-900	71	57	hybrid	hybrid	NOUN
fuelectenerg-900	71	58	)	)	PUNCT
fuelectenerg-900	71	59	with	with	ADP
fuelectenerg-900	71	60	cmos	cmos	PROPN
fuelectenerg-900	71	61	ics	ic	NOUN
fuelectenerg-900	71	62	.	.	PUNCT
fuelectenerg-900	72	1	an	an	DET
fuelectenerg-900	72	2	especially	especially	ADV
fuelectenerg-900	72	3	attractive	attractive	ADJ
fuelectenerg-900	72	4	feature	feature	NOUN
fuelectenerg-900	72	5	of	of	ADP
fuelectenerg-900	72	6	mems	mem	NOUN
fuelectenerg-900	72	7	resonators	resonator	NOUN
fuelectenerg-900	72	8	is	be	AUX
fuelectenerg-900	72	9	the	the	DET
fuelectenerg-900	72	10	tunability	tunability	NOUN
fuelectenerg-900	72	11	of	of	ADP
fuelectenerg-900	72	12	their	their	PRON
fuelectenerg-900	72	13	parameters	parameter	NOUN
fuelectenerg-900	72	14	.	.	PUNCT
fuelectenerg-900	73	1	em	em	PRON
fuelectenerg-900	73	2	resonators	resonator	VERB
fuelectenerg-900	73	3	consist	consist	VERB
fuelectenerg-900	73	4	of	of	ADP
fuelectenerg-900	73	5	the	the	DET
fuelectenerg-900	73	6	resonant	resonant	ADJ
fuelectenerg-900	73	7	mechanical	mechanical	ADJ
fuelectenerg-900	73	8	structure	structure	NOUN
fuelectenerg-900	73	9	and	and	CCONJ
fuelectenerg-900	73	10	the	the	DET
fuelectenerg-900	73	11	input	input	NOUN
fuelectenerg-900	73	12	and	and	CCONJ
fuelectenerg-900	73	13	output	output	NOUN
fuelectenerg-900	73	14	electromechanical	electromechanical	ADJ
fuelectenerg-900	73	15	transducer	transducer	NOUN
fuelectenerg-900	73	16	.	.	PUNCT
fuelectenerg-900	74	1	the	the	DET
fuelectenerg-900	74	2	operation	operation	NOUN
fuelectenerg-900	74	3	of	of	ADP
fuelectenerg-900	74	4	em	em	PRON
fuelectenerg-900	74	5	resonators	resonator	NOUN
fuelectenerg-900	74	6	is	be	AUX
fuelectenerg-900	74	7	based	base	VERB
fuelectenerg-900	74	8	on	on	ADP
fuelectenerg-900	74	9	mechanical	mechanical	ADJ
fuelectenerg-900	74	10	oscillations	oscillation	NOUN
fuelectenerg-900	74	11	of	of	ADP
fuelectenerg-900	74	12	a	a	DET
fuelectenerg-900	74	13	resonant	resonant	ADJ
fuelectenerg-900	74	14	structure	structure	NOUN
fuelectenerg-900	74	15	,	,	PUNCT
fuelectenerg-900	74	16	which	which	PRON
fuelectenerg-900	74	17	are	be	AUX
fuelectenerg-900	74	18	actuated	actuate	VERB
fuelectenerg-900	74	19	by	by	ADP
fuelectenerg-900	74	20	the	the	DET
fuelectenerg-900	74	21	input	input	NOUN
fuelectenerg-900	74	22	electrical	electrical	ADJ
fuelectenerg-900	74	23	signal	signal	NOUN
fuelectenerg-900	74	24	and	and	CCONJ
fuelectenerg-900	74	25	converted	convert	VERB
fuelectenerg-900	74	26	in	in	ADP
fuelectenerg-900	74	27	the	the	DET
fuelectenerg-900	74	28	output	output	NOUN
fuelectenerg-900	74	29	electrical	electrical	ADJ
fuelectenerg-900	74	30	signal	signal	NOUN
fuelectenerg-900	74	31	.	.	PUNCT
fuelectenerg-900	75	1	an	an	DET
fuelectenerg-900	75	2	input	input	NOUN
fuelectenerg-900	75	3	em	em	PRON
fuelectenerg-900	75	4	transducer	transducer	NOUN
fuelectenerg-900	75	5	converts	convert	NOUN
fuelectenerg-900	75	6	electrical	electrical	ADJ
fuelectenerg-900	75	7	energy	energy	NOUN
fuelectenerg-900	75	8	into	into	ADP
fuelectenerg-900	75	9	mechanical	mechanical	ADJ
fuelectenerg-900	75	10	energy	energy	NOUN
fuelectenerg-900	75	11	(	(	PUNCT
fuelectenerg-900	75	12	i.e.	i.e.	X
fuelectenerg-900	75	13	electric	electric	ADJ
fuelectenerg-900	75	14	voltage	voltage	NOUN
fuelectenerg-900	75	15	into	into	ADP
fuelectenerg-900	75	16	force	force	NOUN
fuelectenerg-900	75	17	or	or	CCONJ
fuelectenerg-900	75	18	mechanical	mechanical	ADJ
fuelectenerg-900	75	19	stress	stress	NOUN
fuelectenerg-900	75	20	)	)	PUNCT
fuelectenerg-900	75	21	,	,	PUNCT
fuelectenerg-900	75	22	whereas	whereas	SCONJ
fuelectenerg-900	75	23	an	an	DET
fuelectenerg-900	75	24	output	output	NOUN
fuelectenerg-900	75	25	transducer	transducer	NOUN
fuelectenerg-900	75	26	converts	convert	NOUN
fuelectenerg-900	75	27	mechanical	mechanical	ADJ
fuelectenerg-900	75	28	energy	energy	NOUN
fuelectenerg-900	75	29	into	into	ADP
fuelectenerg-900	75	30	electrical	electrical	ADJ
fuelectenerg-900	75	31	energy	energy	NOUN
fuelectenerg-900	75	32	(	(	PUNCT
fuelectenerg-900	75	33	i.e.	i.e.	X
fuelectenerg-900	75	34	displacement	displacement	NOUN
fuelectenerg-900	75	35	or	or	CCONJ
fuelectenerg-900	75	36	deformation	deformation	NOUN
fuelectenerg-900	75	37	of	of	ADP
fuelectenerg-900	75	38	the	the	DET
fuelectenerg-900	75	39	resonant	resonant	ADJ
fuelectenerg-900	75	40	structure	structure	NOUN
fuelectenerg-900	75	41	into	into	ADP
fuelectenerg-900	75	42	an	an	DET
fuelectenerg-900	75	43	output	output	NOUN
fuelectenerg-900	75	44	electrical	electrical	ADJ
fuelectenerg-900	75	45	signal	signal	NOUN
fuelectenerg-900	75	46	)	)	PUNCT
fuelectenerg-900	75	47	.	.	PUNCT
fuelectenerg-900	76	1	the	the	DET
fuelectenerg-900	76	2	actuation	actuation	NOUN
fuelectenerg-900	76	3	is	be	AUX
fuelectenerg-900	76	4	usually	usually	ADV
fuelectenerg-900	76	5	achieved	achieve	VERB
fuelectenerg-900	76	6	through	through	ADP
fuelectenerg-900	76	7	the	the	DET
fuelectenerg-900	76	8	action	action	NOUN
fuelectenerg-900	76	9	of	of	ADP
fuelectenerg-900	76	10	electrostatic	electrostatic	ADJ
fuelectenerg-900	76	11	(	(	PUNCT
fuelectenerg-900	76	12	es	es	NOUN
fuelectenerg-900	76	13	)	)	PUNCT
fuelectenerg-900	76	14	or	or	CCONJ
fuelectenerg-900	76	15	magnetic	magnetic	ADJ
fuelectenerg-900	76	16	force	force	NOUN
fuelectenerg-900	76	17	,	,	PUNCT
fuelectenerg-900	76	18	or	or	CCONJ
fuelectenerg-900	76	19	it	it	PRON
fuelectenerg-900	76	20	is	be	AUX
fuelectenerg-900	76	21	based	base	VERB
fuelectenerg-900	76	22	on	on	ADP
fuelectenerg-900	76	23	a	a	DET
fuelectenerg-900	76	24	piezoelectric	piezoelectric	NOUN
fuelectenerg-900	76	25	(	(	PUNCT
fuelectenerg-900	76	26	pe	pe	NOUN
fuelectenerg-900	76	27	)	)	PUNCT
fuelectenerg-900	76	28	effect	effect	NOUN
fuelectenerg-900	76	29	or	or	CCONJ
fuelectenerg-900	76	30	on	on	ADP
fuelectenerg-900	76	31	thermally	thermally	ADV
fuelectenerg-900	76	32	induced	induce	VERB
fuelectenerg-900	76	33	expansion	expansion	NOUN
fuelectenerg-900	76	34	.	.	PUNCT
fuelectenerg-900	77	1	the	the	DET
fuelectenerg-900	77	2	mechanism	mechanism	NOUN
fuelectenerg-900	77	3	of	of	ADP
fuelectenerg-900	77	4	conversion	conversion	NOUN
fuelectenerg-900	77	5	of	of	ADP
fuelectenerg-900	77	6	mechanical	mechanical	ADJ
fuelectenerg-900	77	7	energy	energy	NOUN
fuelectenerg-900	77	8	into	into	ADP
fuelectenerg-900	77	9	an	an	DET
fuelectenerg-900	77	10	electrical	electrical	ADJ
fuelectenerg-900	77	11	signal	signal	NOUN
fuelectenerg-900	77	12	can	can	AUX
fuelectenerg-900	77	13	be	be	AUX
fuelectenerg-900	77	14	capacitive	capacitive	ADJ
fuelectenerg-900	77	15	,	,	PUNCT
fuelectenerg-900	77	16	piezoelectric	piezoelectric	NOUN
fuelectenerg-900	77	17	,	,	PUNCT
fuelectenerg-900	77	18	piezoresistive	piezoresistive	ADJ
fuelectenerg-900	77	19	,	,	PUNCT
fuelectenerg-900	77	20	etc	etc	X
fuelectenerg-900	77	21	.	.	X
fuelectenerg-900	78	1	the	the	DET
fuelectenerg-900	78	2	most	most	ADV
fuelectenerg-900	78	3	common	common	ADJ
fuelectenerg-900	78	4	are	be	AUX
fuelectenerg-900	78	5	the	the	DET
fuelectenerg-900	78	6	combination	combination	NOUN
fuelectenerg-900	78	7	of	of	ADP
fuelectenerg-900	78	8	es	es	X
fuelectenerg-900	78	9	(	(	PUNCT
fuelectenerg-900	78	10	capacitive	capacitive	ADJ
fuelectenerg-900	78	11	)	)	PUNCT
fuelectenerg-900	78	12	actuation	actuation	NOUN
fuelectenerg-900	78	13	and	and	CCONJ
fuelectenerg-900	78	14	capacitive	capacitive	ADJ
fuelectenerg-900	78	15	detection	detection	NOUN
fuelectenerg-900	78	16	of	of	ADP
fuelectenerg-900	78	17	mechanical	mechanical	ADJ
fuelectenerg-900	78	18	oscillations	oscillation	NOUN
fuelectenerg-900	78	19	and	and	CCONJ
fuelectenerg-900	78	20	the	the	DET
fuelectenerg-900	78	21	combination	combination	NOUN
fuelectenerg-900	78	22	of	of	ADP
fuelectenerg-900	78	23	pe	pe	ADP
fuelectenerg-900	78	24	actuation	actuation	NOUN
fuelectenerg-900	78	25	and	and	CCONJ
fuelectenerg-900	78	26	detection	detection	NOUN
fuelectenerg-900	78	27	.	.	PUNCT
fuelectenerg-900	79	1	electromechanical	electromechanical	ADJ
fuelectenerg-900	79	2	transducers	transducer	NOUN
fuelectenerg-900	79	3	are	be	AUX
fuelectenerg-900	79	4	characterized	characterize	VERB
fuelectenerg-900	79	5	by	by	ADP
fuelectenerg-900	79	6	the	the	DET
fuelectenerg-900	79	7	coefficient	coefficient	NOUN
fuelectenerg-900	79	8	of	of	ADP
fuelectenerg-900	79	9	electromechanical	electromechanical	ADJ
fuelectenerg-900	79	10	coupling	coupling	NOUN
fuelectenerg-900	79	11	,	,	PUNCT
fuelectenerg-900	79	12	which	which	PRON
fuelectenerg-900	79	13	is	be	AUX
fuelectenerg-900	79	14	a	a	DET
fuelectenerg-900	79	15	measure	measure	NOUN
fuelectenerg-900	79	16	of	of	ADP
fuelectenerg-900	79	17	the	the	DET
fuelectenerg-900	79	18	efficiency	efficiency	NOUN
fuelectenerg-900	79	19	of	of	ADP
fuelectenerg-900	79	20	energy	energy	NOUN
fuelectenerg-900	79	21	conversion	conversion	NOUN
fuelectenerg-900	79	22	between	between	ADP
fuelectenerg-900	79	23	electrical	electrical	ADJ
fuelectenerg-900	79	24	and	and	CCONJ
fuelectenerg-900	79	25	mechanical	mechanical	ADJ
fuelectenerg-900	79	26	domains	domain	NOUN
fuelectenerg-900	79	27	of	of	ADP
fuelectenerg-900	79	28	a	a	DET
fuelectenerg-900	79	29	resonator	resonator	NOUN
fuelectenerg-900	79	30	.	.	PUNCT
fuelectenerg-900	80	1	it	it	PRON
fuelectenerg-900	80	2	depends	depend	VERB
fuelectenerg-900	80	3	on	on	ADP
fuelectenerg-900	80	4	the	the	DET
fuelectenerg-900	80	5	shape	shape	NOUN
fuelectenerg-900	80	6	and	and	CCONJ
fuelectenerg-900	80	7	dimensions	dimension	NOUN
fuelectenerg-900	80	8	of	of	ADP
fuelectenerg-900	80	9	the	the	DET
fuelectenerg-900	80	10	resonant	resonant	ADJ
fuelectenerg-900	80	11	structure	structure	NOUN
fuelectenerg-900	80	12	,	,	PUNCT
fuelectenerg-900	80	13	material	material	NOUN
fuelectenerg-900	80	14	parameters	parameter	NOUN
fuelectenerg-900	80	15	,	,	PUNCT
fuelectenerg-900	80	16	mode	mode	NOUN
fuelectenerg-900	80	17	of	of	ADP
fuelectenerg-900	80	18	oscillation	oscillation	NOUN
fuelectenerg-900	80	19	,	,	PUNCT
fuelectenerg-900	80	20	the	the	DET
fuelectenerg-900	80	21	transduction	transduction	NOUN
fuelectenerg-900	80	22	mechanism	mechanism	NOUN
fuelectenerg-900	80	23	,	,	PUNCT
fuelectenerg-900	80	24	the	the	DET
fuelectenerg-900	80	25	transducer	transducer	NOUN
fuelectenerg-900	80	26	's	's	PART
fuelectenerg-900	80	27	parameters	parameter	NOUN
fuelectenerg-900	80	28	,	,	PUNCT
fuelectenerg-900	80	29	as	as	ADV
fuelectenerg-900	80	30	well	well	ADV
fuelectenerg-900	80	31	as	as	ADP
fuelectenerg-900	80	32	the	the	DET
fuelectenerg-900	80	33	position	position	NOUN
fuelectenerg-900	80	34	and	and	CCONJ
fuelectenerg-900	80	35	size	size	NOUN
fuelectenerg-900	80	36	of	of	ADP
fuelectenerg-900	80	37	electrodes	electrode	NOUN
fuelectenerg-900	80	38	,	,	PUNCT
fuelectenerg-900	80	39	and	and	CCONJ
fuelectenerg-900	80	40	it	it	PRON
fuelectenerg-900	80	41	significantly	significantly	ADV
fuelectenerg-900	80	42	influences	influence	VERB
fuelectenerg-900	80	43	the	the	DET
fuelectenerg-900	80	44	parameters	parameter	NOUN
fuelectenerg-900	80	45	of	of	ADP
fuelectenerg-900	80	46	the	the	DET
fuelectenerg-900	80	47	resonator	resonator	NOUN
fuelectenerg-900	80	48	(	(	PUNCT
fuelectenerg-900	80	49	e.g.	e.g.	ADV
fuelectenerg-900	80	50	the	the	DET
fuelectenerg-900	80	51	equivalent	equivalent	ADJ
fuelectenerg-900	80	52	series	series	NOUN
fuelectenerg-900	80	53	resistance	resistance	NOUN
fuelectenerg-900	80	54	)	)	PUNCT
fuelectenerg-900	81	1	[	[	X
fuelectenerg-900	81	2	3	3	NUM
fuelectenerg-900	81	3	]	]	PUNCT
fuelectenerg-900	81	4	.	.	PUNCT
fuelectenerg-900	82	1	the	the	DET
fuelectenerg-900	82	2	capacitive	capacitive	ADJ
fuelectenerg-900	82	3	actuation	actuation	NOUN
fuelectenerg-900	82	4	and	and	CCONJ
fuelectenerg-900	82	5	detection	detection	NOUN
fuelectenerg-900	82	6	of	of	ADP
fuelectenerg-900	82	7	mechanical	mechanical	ADJ
fuelectenerg-900	82	8	oscillation	oscillation	NOUN
fuelectenerg-900	82	9	of	of	ADP
fuelectenerg-900	82	10	the	the	DET
fuelectenerg-900	82	11	resonant	resonant	ADJ
fuelectenerg-900	82	12	structure	structure	NOUN
fuelectenerg-900	82	13	are	be	AUX
fuelectenerg-900	82	14	achieved	achieve	VERB
fuelectenerg-900	82	15	as	as	SCONJ
fuelectenerg-900	82	16	shown	show	VERB
fuelectenerg-900	82	17	in	in	ADP
fuelectenerg-900	82	18	fig	fig	NOUN
fuelectenerg-900	82	19	.	.	PUNCT
fuelectenerg-900	83	1	2a	2a	NUM
fuelectenerg-900	83	2	.	.	PUNCT
fuelectenerg-900	84	1	dc	dc	PROPN
fuelectenerg-900	84	2	voltage	voltage	NOUN
fuelectenerg-900	84	3	vp	vp	PROPN
fuelectenerg-900	84	4	is	be	AUX
fuelectenerg-900	84	5	applied	apply	VERB
fuelectenerg-900	84	6	to	to	ADP
fuelectenerg-900	84	7	the	the	DET
fuelectenerg-900	84	8	resonant	resonant	ADJ
fuelectenerg-900	84	9	structure	structure	NOUN
fuelectenerg-900	84	10	,	,	PUNCT
fuelectenerg-900	84	11	whereas	whereas	SCONJ
fuelectenerg-900	84	12	alternating	alternate	VERB
fuelectenerg-900	84	13	driving	drive	VERB
fuelectenerg-900	84	14	voltage	voltage	NOUN
fuelectenerg-900	84	15	vi	vi	PROPN
fuelectenerg-900	84	16	is	be	AUX
fuelectenerg-900	84	17	applied	apply	VERB
fuelectenerg-900	84	18	to	to	ADP
fuelectenerg-900	84	19	the	the	DET
fuelectenerg-900	84	20	input	input	NOUN
fuelectenerg-900	84	21	electrode	electrode	NOUN
fuelectenerg-900	84	22	.	.	PUNCT
fuelectenerg-900	85	1	these	these	DET
fuelectenerg-900	85	2	350	350	NUM
fuelectenerg-900	85	3	i.	i.	NOUN
fuelectenerg-900	85	4	jokić	jokić	PROPN
fuelectenerg-900	85	5	,	,	PUNCT
fuelectenerg-900	85	6	m.	m.	NOUN
fuelectenerg-900	85	7	frantlović	frantlović	NOUN
fuelectenerg-900	85	8	,	,	PUNCT
fuelectenerg-900	85	9	z.	z.	PROPN
fuelectenerg-900	85	10	djurić	djurić	PROPN
fuelectenerg-900	85	11	,	,	PUNCT
fuelectenerg-900	85	12	m.	m.	NOUN
fuelectenerg-900	85	13	l.	l.	PROPN
fuelectenerg-900	85	14	dukić	dukić	PROPN
fuelectenerg-900	85	15	two	two	NUM
fuelectenerg-900	85	16	voltages	voltage	NOUN
fuelectenerg-900	85	17	together	together	ADV
fuelectenerg-900	85	18	generate	generate	VERB
fuelectenerg-900	85	19	time	time	NOUN
fuelectenerg-900	85	20	-	-	PUNCT
fuelectenerg-900	85	21	variable	variable	ADJ
fuelectenerg-900	85	22	electric	electric	ADJ
fuelectenerg-900	85	23	force	force	NOUN
fuelectenerg-900	85	24	acting	act	VERB
fuelectenerg-900	85	25	on	on	ADP
fuelectenerg-900	85	26	the	the	DET
fuelectenerg-900	85	27	resonant	resonant	ADJ
fuelectenerg-900	85	28	structure	structure	NOUN
fuelectenerg-900	85	29	and	and	CCONJ
fuelectenerg-900	85	30	exciting	exciting	ADJ
fuelectenerg-900	85	31	its	its	PRON
fuelectenerg-900	85	32	mechanical	mechanical	ADJ
fuelectenerg-900	85	33	resonant	resonant	NOUN
fuelectenerg-900	85	34	oscillation	oscillation	NOUN
fuelectenerg-900	85	35	if	if	SCONJ
fuelectenerg-900	85	36	the	the	DET
fuelectenerg-900	85	37	frequency	frequency	NOUN
fuelectenerg-900	85	38	of	of	ADP
fuelectenerg-900	85	39	the	the	DET
fuelectenerg-900	85	40	excitation	excitation	NOUN
fuelectenerg-900	85	41	electrical	electrical	ADJ
fuelectenerg-900	85	42	signal	signal	NOUN
fuelectenerg-900	85	43	is	be	AUX
fuelectenerg-900	85	44	equal	equal	ADJ
fuelectenerg-900	85	45	to	to	ADP
fuelectenerg-900	85	46	the	the	DET
fuelectenerg-900	85	47	mechanical	mechanical	ADJ
fuelectenerg-900	85	48	resonance	resonance	NOUN
fuelectenerg-900	85	49	frequency	frequency	NOUN
fuelectenerg-900	85	50	of	of	ADP
fuelectenerg-900	85	51	the	the	DET
fuelectenerg-900	85	52	structure	structure	NOUN
fuelectenerg-900	85	53	(	(	PUNCT
fuelectenerg-900	85	54	which	which	PRON
fuelectenerg-900	85	55	depends	depend	VERB
fuelectenerg-900	85	56	on	on	ADP
fuelectenerg-900	85	57	the	the	DET
fuelectenerg-900	85	58	geometrical	geometrical	ADJ
fuelectenerg-900	85	59	parameters	parameter	NOUN
fuelectenerg-900	85	60	of	of	ADP
fuelectenerg-900	85	61	the	the	DET
fuelectenerg-900	85	62	resonant	resonant	ADJ
fuelectenerg-900	85	63	structure	structure	NOUN
fuelectenerg-900	85	64	and	and	CCONJ
fuelectenerg-900	85	65	parameters	parameter	NOUN
fuelectenerg-900	85	66	of	of	ADP
fuelectenerg-900	85	67	the	the	DET
fuelectenerg-900	85	68	materials	material	NOUN
fuelectenerg-900	85	69	from	from	ADP
fuelectenerg-900	85	70	which	which	PRON
fuelectenerg-900	85	71	it	it	PRON
fuelectenerg-900	85	72	is	be	AUX
fuelectenerg-900	85	73	made	make	VERB
fuelectenerg-900	85	74	)	)	PUNCT
fuelectenerg-900	85	75	.	.	PUNCT
fuelectenerg-900	86	1	during	during	ADP
fuelectenerg-900	86	2	the	the	DET
fuelectenerg-900	86	3	resonant	resonant	ADJ
fuelectenerg-900	86	4	oscillation	oscillation	NOUN
fuelectenerg-900	86	5	of	of	ADP
fuelectenerg-900	86	6	the	the	DET
fuelectenerg-900	86	7	structure	structure	NOUN
fuelectenerg-900	86	8	,	,	PUNCT
fuelectenerg-900	86	9	the	the	DET
fuelectenerg-900	86	10	distance	distance	NOUN
fuelectenerg-900	86	11	between	between	ADP
fuelectenerg-900	86	12	the	the	DET
fuelectenerg-900	86	13	structure	structure	NOUN
fuelectenerg-900	86	14	and	and	CCONJ
fuelectenerg-900	86	15	the	the	DET
fuelectenerg-900	86	16	output	output	NOUN
fuelectenerg-900	86	17	electrode	electrode	NOUN
fuelectenerg-900	86	18	changes	change	NOUN
fuelectenerg-900	86	19	in	in	ADP
fuelectenerg-900	86	20	time	time	NOUN
fuelectenerg-900	86	21	.	.	PUNCT
fuelectenerg-900	87	1	consequently	consequently	ADV
fuelectenerg-900	87	2	,	,	PUNCT
fuelectenerg-900	87	3	the	the	DET
fuelectenerg-900	87	4	corresponding	correspond	VERB
fuelectenerg-900	87	5	capacitance	capacitance	NOUN
fuelectenerg-900	87	6	and	and	CCONJ
fuelectenerg-900	87	7	the	the	DET
fuelectenerg-900	87	8	output	output	NOUN
fuelectenerg-900	87	9	current	current	NOUN
fuelectenerg-900	87	10	also	also	ADV
fuelectenerg-900	87	11	change	change	VERB
fuelectenerg-900	87	12	,	,	PUNCT
fuelectenerg-900	87	13	this	this	DET
fuelectenerg-900	87	14	change	change	NOUN
fuelectenerg-900	87	15	being	be	AUX
fuelectenerg-900	87	16	directly	directly	ADV
fuelectenerg-900	87	17	proportional	proportional	ADJ
fuelectenerg-900	87	18	to	to	ADP
fuelectenerg-900	87	19	the	the	DET
fuelectenerg-900	87	20	instantaneous	instantaneous	ADJ
fuelectenerg-900	87	21	value	value	NOUN
fuelectenerg-900	87	22	of	of	ADP
fuelectenerg-900	87	23	the	the	DET
fuelectenerg-900	87	24	oscillation	oscillation	NOUN
fuelectenerg-900	87	25	amplitude	amplitude	NOUN
fuelectenerg-900	87	26	and	and	CCONJ
fuelectenerg-900	87	27	bias	bias	NOUN
fuelectenerg-900	87	28	voltage	voltage	NOUN
fuelectenerg-900	87	29	vp	vp	PROPN
fuelectenerg-900	87	30	.	.	PUNCT
fuelectenerg-900	87	31	accordingly	accordingly	ADV
fuelectenerg-900	87	32	,	,	PUNCT
fuelectenerg-900	87	33	the	the	DET
fuelectenerg-900	87	34	output	output	NOUN
fuelectenerg-900	87	35	current	current	NOUN
fuelectenerg-900	87	36	is	be	AUX
fuelectenerg-900	87	37	generated	generate	VERB
fuelectenerg-900	87	38	only	only	ADV
fuelectenerg-900	87	39	if	if	SCONJ
fuelectenerg-900	87	40	vp≠0	vp≠0	PROPN
fuelectenerg-900	87	41	,	,	PUNCT
fuelectenerg-900	87	42	and	and	CCONJ
fuelectenerg-900	87	43	the	the	DET
fuelectenerg-900	87	44	capacitive	capacitive	ADJ
fuelectenerg-900	87	45	resonators	resonator	NOUN
fuelectenerg-900	87	46	are	be	AUX
fuelectenerg-900	87	47	switched	switch	VERB
fuelectenerg-900	87	48	on	on	ADP
fuelectenerg-900	87	49	and	and	CCONJ
fuelectenerg-900	87	50	off	off	ADV
fuelectenerg-900	87	51	by	by	ADP
fuelectenerg-900	87	52	a	a	DET
fuelectenerg-900	87	53	simple	simple	ADJ
fuelectenerg-900	87	54	mechanism	mechanism	NOUN
fuelectenerg-900	87	55	(	(	PUNCT
fuelectenerg-900	87	56	by	by	ADP
fuelectenerg-900	87	57	turning	turn	VERB
fuelectenerg-900	87	58	the	the	DET
fuelectenerg-900	87	59	polarization	polarization	NOUN
fuelectenerg-900	87	60	voltage	voltage	NOUN
fuelectenerg-900	87	61	on	on	ADP
fuelectenerg-900	87	62	and	and	CCONJ
fuelectenerg-900	87	63	off	off	ADP
fuelectenerg-900	87	64	)	)	PUNCT
fuelectenerg-900	87	65	.	.	PUNCT
fuelectenerg-900	88	1	in	in	ADP
fuelectenerg-900	88	2	order	order	NOUN
fuelectenerg-900	88	3	to	to	PART
fuelectenerg-900	88	4	achieve	achieve	VERB
fuelectenerg-900	88	5	low	low	ADJ
fuelectenerg-900	88	6	power	power	NOUN
fuelectenerg-900	88	7	consumption	consumption	NOUN
fuelectenerg-900	88	8	and	and	CCONJ
fuelectenerg-900	88	9	integrability	integrability	NOUN
fuelectenerg-900	88	10	with	with	ADP
fuelectenerg-900	88	11	the	the	DET
fuelectenerg-900	88	12	integrated	integrate	VERB
fuelectenerg-900	88	13	circuits	circuit	NOUN
fuelectenerg-900	88	14	,	,	PUNCT
fuelectenerg-900	88	15	the	the	DET
fuelectenerg-900	88	16	value	value	NOUN
fuelectenerg-900	88	17	of	of	ADP
fuelectenerg-900	88	18	vp	vp	PROPN
fuelectenerg-900	88	19	should	should	AUX
fuelectenerg-900	88	20	be	be	AUX
fuelectenerg-900	88	21	low	low	ADJ
fuelectenerg-900	88	22	enough	enough	ADV
fuelectenerg-900	88	23	.	.	PUNCT
fuelectenerg-900	89	1	therefore	therefore	ADV
fuelectenerg-900	89	2	,	,	PUNCT
fuelectenerg-900	89	3	the	the	DET
fuelectenerg-900	89	4	distance	distance	NOUN
fuelectenerg-900	89	5	g	g	NOUN
fuelectenerg-900	89	6	between	between	ADP
fuelectenerg-900	89	7	the	the	DET
fuelectenerg-900	89	8	electrodes	electrode	NOUN
fuelectenerg-900	89	9	of	of	ADP
fuelectenerg-900	89	10	capacitive	capacitive	ADJ
fuelectenerg-900	89	11	transducers	transducer	NOUN
fuelectenerg-900	89	12	and	and	CCONJ
fuelectenerg-900	89	13	the	the	DET
fuelectenerg-900	89	14	resonant	resonant	ADJ
fuelectenerg-900	89	15	structure	structure	NOUN
fuelectenerg-900	89	16	should	should	AUX
fuelectenerg-900	89	17	be	be	AUX
fuelectenerg-900	89	18	less	less	ADJ
fuelectenerg-900	89	19	than	than	ADP
fuelectenerg-900	89	20	1	1	NUM
fuelectenerg-900	89	21	μm	μm	NUM
fuelectenerg-900	89	22	.	.	PUNCT
fuelectenerg-900	90	1	a	a	DET
fuelectenerg-900	90	2	smaller	small	ADJ
fuelectenerg-900	90	3	electrode	electrode	NOUN
fuelectenerg-900	90	4	gap	gap	NOUN
fuelectenerg-900	90	5	and	and	CCONJ
fuelectenerg-900	90	6	a	a	DET
fuelectenerg-900	90	7	greater	great	ADJ
fuelectenerg-900	90	8	surface	surface	NOUN
fuelectenerg-900	90	9	area	area	NOUN
fuelectenerg-900	90	10	of	of	ADP
fuelectenerg-900	90	11	electrodes	electrode	NOUN
fuelectenerg-900	90	12	ensure	ensure	VERB
fuelectenerg-900	90	13	a	a	PRON
fuelectenerg-900	90	14	greater	great	ADJ
fuelectenerg-900	90	15	em	em	PRON
fuelectenerg-900	90	16	coupling	couple	VERB
fuelectenerg-900	90	17	coefficient	coefficient	NOUN
fuelectenerg-900	90	18	.	.	PUNCT
fuelectenerg-900	91	1	the	the	DET
fuelectenerg-900	91	2	coupling	coupling	NOUN
fuelectenerg-900	91	3	coefficient	coefficient	NOUN
fuelectenerg-900	91	4	in	in	ADP
fuelectenerg-900	91	5	es	es	PRON
fuelectenerg-900	91	6	transduction	transduction	NOUN
fuelectenerg-900	91	7	depends	depend	VERB
fuelectenerg-900	91	8	on	on	ADP
fuelectenerg-900	91	9	the	the	DET
fuelectenerg-900	91	10	bias	bias	NOUN
fuelectenerg-900	91	11	voltage	voltage	NOUN
fuelectenerg-900	91	12	(	(	PUNCT
fuelectenerg-900	91	13	it	it	PRON
fuelectenerg-900	91	14	is	be	AUX
fuelectenerg-900	91	15	directly	directly	ADV
fuelectenerg-900	91	16	proportional	proportional	ADJ
fuelectenerg-900	91	17	)	)	PUNCT
fuelectenerg-900	91	18	.	.	PUNCT
fuelectenerg-900	92	1	fig	fig	NOUN
fuelectenerg-900	92	2	.	.	PUNCT
fuelectenerg-900	93	1	2	2	NUM
fuelectenerg-900	93	2	schematic	schematic	ADJ
fuelectenerg-900	93	3	representation	representation	NOUN
fuelectenerg-900	93	4	of	of	ADP
fuelectenerg-900	93	5	mems	mem	NOUN
fuelectenerg-900	93	6	resonators	resonator	NOUN
fuelectenerg-900	93	7	,	,	PUNCT
fuelectenerg-900	93	8	illustrating	illustrate	VERB
fuelectenerg-900	93	9	their	their	PRON
fuelectenerg-900	93	10	basic	basic	ADJ
fuelectenerg-900	93	11	electromechanical	electromechanical	ADJ
fuelectenerg-900	93	12	configuration	configuration	NOUN
fuelectenerg-900	93	13	and	and	CCONJ
fuelectenerg-900	93	14	principle	principle	NOUN
fuelectenerg-900	93	15	of	of	ADP
fuelectenerg-900	93	16	operation	operation	NOUN
fuelectenerg-900	93	17	:	:	PUNCT
fuelectenerg-900	93	18	a	a	X
fuelectenerg-900	93	19	)	)	PUNCT
fuelectenerg-900	93	20	a	a	DET
fuelectenerg-900	93	21	resonator	resonator	NOUN
fuelectenerg-900	93	22	with	with	ADP
fuelectenerg-900	93	23	capacitive	capacitive	ADJ
fuelectenerg-900	93	24	actuation	actuation	NOUN
fuelectenerg-900	93	25	and	and	CCONJ
fuelectenerg-900	93	26	detection	detection	NOUN
fuelectenerg-900	93	27	of	of	ADP
fuelectenerg-900	93	28	mechanical	mechanical	ADJ
fuelectenerg-900	93	29	oscillation	oscillation	NOUN
fuelectenerg-900	93	30	,	,	PUNCT
fuelectenerg-900	93	31	b	b	NOUN
fuelectenerg-900	93	32	)	)	PUNCT
fuelectenerg-900	93	33	with	with	ADP
fuelectenerg-900	93	34	piezoelectric	piezoelectric	NOUN
fuelectenerg-900	93	35	(	(	PUNCT
fuelectenerg-900	93	36	pe	pe	NOUN
fuelectenerg-900	93	37	)	)	PUNCT
fuelectenerg-900	93	38	actuation	actuation	NOUN
fuelectenerg-900	93	39	and	and	CCONJ
fuelectenerg-900	93	40	detection	detection	NOUN
fuelectenerg-900	93	41	of	of	ADP
fuelectenerg-900	93	42	bulk	bulk	ADJ
fuelectenerg-900	93	43	acoustic	acoustic	ADJ
fuelectenerg-900	93	44	waves	wave	NOUN
fuelectenerg-900	93	45	,	,	PUNCT
fuelectenerg-900	93	46	c	c	NOUN
fuelectenerg-900	93	47	)	)	PUNCT
fuelectenerg-900	93	48	with	with	ADP
fuelectenerg-900	93	49	pe	pe	ADP
fuelectenerg-900	93	50	actuation	actuation	NOUN
fuelectenerg-900	93	51	and	and	CCONJ
fuelectenerg-900	93	52	detection	detection	NOUN
fuelectenerg-900	93	53	of	of	ADP
fuelectenerg-900	93	54	surface	surface	NOUN
fuelectenerg-900	93	55	acoustic	acoustic	ADJ
fuelectenerg-900	93	56	waves	wave	NOUN
fuelectenerg-900	93	57	.	.	PUNCT
fuelectenerg-900	94	1	the	the	DET
fuelectenerg-900	94	2	resonant	resonant	ADJ
fuelectenerg-900	94	3	structure	structure	NOUN
fuelectenerg-900	94	4	of	of	ADP
fuelectenerg-900	94	5	capacitive	capacitive	ADJ
fuelectenerg-900	94	6	resonators	resonator	NOUN
fuelectenerg-900	94	7	can	can	AUX
fuelectenerg-900	94	8	be	be	AUX
fuelectenerg-900	94	9	in	in	ADP
fuelectenerg-900	94	10	the	the	DET
fuelectenerg-900	94	11	shape	shape	NOUN
fuelectenerg-900	94	12	of	of	ADP
fuelectenerg-900	94	13	a	a	DET
fuelectenerg-900	94	14	cantilever	cantilever	NOUN
fuelectenerg-900	94	15	,	,	PUNCT
fuelectenerg-900	94	16	clamped	clamp	VERB
fuelectenerg-900	94	17	-	-	PUNCT
fuelectenerg-900	94	18	clamped	clamp	VERB
fuelectenerg-900	94	19	or	or	CCONJ
fuelectenerg-900	94	20	free	free	ADJ
fuelectenerg-900	94	21	-	-	PUNCT
fuelectenerg-900	94	22	free	free	ADJ
fuelectenerg-900	94	23	beam	beam	NOUN
fuelectenerg-900	94	24	,	,	PUNCT
fuelectenerg-900	94	25	membrane	membrane	NOUN
fuelectenerg-900	94	26	,	,	PUNCT
fuelectenerg-900	94	27	disk	disk	NOUN
fuelectenerg-900	94	28	,	,	PUNCT
fuelectenerg-900	94	29	quadratic	quadratic	ADJ
fuelectenerg-900	94	30	plate	plate	NOUN
fuelectenerg-900	94	31	,	,	PUNCT
fuelectenerg-900	94	32	ring	ring	NOUN
fuelectenerg-900	94	33	or	or	CCONJ
fuelectenerg-900	94	34	comb	comb	NOUN
fuelectenerg-900	94	35	.	.	PUNCT
fuelectenerg-900	95	1	they	they	PRON
fuelectenerg-900	95	2	are	be	AUX
fuelectenerg-900	95	3	usually	usually	ADV
fuelectenerg-900	95	4	made	make	VERB
fuelectenerg-900	95	5	of	of	ADP
fuelectenerg-900	95	6	silicon	silicon	NOUN
fuelectenerg-900	95	7	,	,	PUNCT
fuelectenerg-900	95	8	but	but	CCONJ
fuelectenerg-900	95	9	silicon	silicon	PROPN
fuelectenerg-900	95	10	carbide	carbide	PROPN
fuelectenerg-900	95	11	,	,	PUNCT
fuelectenerg-900	95	12	silicon	silicon	NOUN
fuelectenerg-900	95	13	nitride	nitride	NOUN
fuelectenerg-900	95	14	,	,	PUNCT
fuelectenerg-900	95	15	diamond	diamond	NOUN
fuelectenerg-900	95	16	,	,	PUNCT
fuelectenerg-900	95	17	germanium	germanium	NOUN
fuelectenerg-900	95	18	,	,	PUNCT
fuelectenerg-900	95	19	silicon	silicon	NOUN
fuelectenerg-900	95	20	germanium	germanium	NOUN
fuelectenerg-900	95	21	,	,	PUNCT
fuelectenerg-900	95	22	gallium	gallium	NOUN
fuelectenerg-900	95	23	arsenide	arsenide	NOUN
fuelectenerg-900	95	24	,	,	PUNCT
fuelectenerg-900	95	25	nickel	nickel	NOUN
fuelectenerg-900	95	26	,	,	PUNCT
fuelectenerg-900	95	27	etc	etc	X
fuelectenerg-900	95	28	.	.	X
fuelectenerg-900	95	29	can	can	AUX
fuelectenerg-900	95	30	also	also	ADV
fuelectenerg-900	95	31	be	be	AUX
fuelectenerg-900	95	32	used	use	VERB
fuelectenerg-900	95	33	.	.	PUNCT
fuelectenerg-900	96	1	the	the	DET
fuelectenerg-900	96	2	most	most	ADV
fuelectenerg-900	96	3	common	common	ADJ
fuelectenerg-900	96	4	configurations	configuration	NOUN
fuelectenerg-900	96	5	of	of	ADP
fuelectenerg-900	96	6	electrodes	electrode	NOUN
fuelectenerg-900	96	7	are	be	AUX
fuelectenerg-900	96	8	parallel	parallel	ADJ
fuelectenerg-900	96	9	plates	plate	NOUN
fuelectenerg-900	96	10	,	,	PUNCT
fuelectenerg-900	96	11	and	and	CCONJ
fuelectenerg-900	96	12	interdigitated	interdigitate	VERB
fuelectenerg-900	96	13	(	(	PUNCT
fuelectenerg-900	96	14	comb	comb	NOUN
fuelectenerg-900	96	15	)	)	PUNCT
fuelectenerg-900	96	16	electrodes	electrode	NOUN
fuelectenerg-900	96	17	.	.	PUNCT
fuelectenerg-900	97	1	a	a	DET
fuelectenerg-900	97	2	conducting	conducting	NOUN
fuelectenerg-900	97	3	material	material	NOUN
fuelectenerg-900	97	4	or	or	CCONJ
fuelectenerg-900	97	5	a	a	DET
fuelectenerg-900	97	6	dielectric	dielectric	NOUN
fuelectenerg-900	97	7	covered	cover	VERB
fuelectenerg-900	97	8	with	with	ADP
fuelectenerg-900	97	9	a	a	DET
fuelectenerg-900	97	10	thin	thin	ADJ
fuelectenerg-900	97	11	conductive	conductive	ADJ
fuelectenerg-900	97	12	layer	layer	NOUN
fuelectenerg-900	97	13	can	can	AUX
fuelectenerg-900	97	14	be	be	AUX
fuelectenerg-900	97	15	used	use	VERB
fuelectenerg-900	97	16	to	to	PART
fuelectenerg-900	97	17	manufacture	manufacture	VERB
fuelectenerg-900	97	18	electrodes	electrode	NOUN
fuelectenerg-900	97	19	.	.	PUNCT
fuelectenerg-900	98	1	electrodes	electrode	NOUN
fuelectenerg-900	98	2	are	be	AUX
fuelectenerg-900	98	3	placed	place	VERB
fuelectenerg-900	98	4	in	in	ADP
fuelectenerg-900	98	5	such	such	DET
fuelectenerg-900	98	6	a	a	DET
fuelectenerg-900	98	7	way	way	NOUN
fuelectenerg-900	98	8	to	to	PART
fuelectenerg-900	98	9	maximize	maximize	VERB
fuelectenerg-900	98	10	coupling	couple	VERB
fuelectenerg-900	98	11	into	into	ADP
fuelectenerg-900	98	12	a	a	DET
fuelectenerg-900	98	13	desired	desire	VERB
fuelectenerg-900	98	14	mode	mode	NOUN
fuelectenerg-900	98	15	of	of	ADP
fuelectenerg-900	98	16	vibration	vibration	NOUN
fuelectenerg-900	98	17	.	.	PUNCT
fuelectenerg-900	99	1	capacitive	capacitive	ADJ
fuelectenerg-900	99	2	resonators	resonator	NOUN
fuelectenerg-900	99	3	oscillate	oscillate	VERB
fuelectenerg-900	99	4	in	in	ADP
fuelectenerg-900	99	5	flexural	flexural	ADJ
fuelectenerg-900	99	6	or	or	CCONJ
fuelectenerg-900	99	7	torsional	torsional	ADJ
fuelectenerg-900	99	8	modes	mode	NOUN
fuelectenerg-900	99	9	,	,	PUNCT
fuelectenerg-900	99	10	but	but	CCONJ
fuelectenerg-900	99	11	there	there	PRON
fuelectenerg-900	99	12	are	be	VERB
fuelectenerg-900	99	13	also	also	ADV
fuelectenerg-900	99	14	capacitive	capacitive	ADJ
fuelectenerg-900	99	15	resonators	resonator	NOUN
fuelectenerg-900	99	16	with	with	ADP
fuelectenerg-900	99	17	bulk	bulk	ADJ
fuelectenerg-900	99	18	oscillation	oscillation	NOUN
fuelectenerg-900	99	19	modes	mode	NOUN
fuelectenerg-900	99	20	:	:	PUNCT
fuelectenerg-900	99	21	extensional	extensional	ADJ
fuelectenerg-900	99	22	longitudinal	longitudinal	ADJ
fuelectenerg-900	99	23	,	,	PUNCT
fuelectenerg-900	99	24	extensional	extensional	ADJ
fuelectenerg-900	99	25	contour	contour	NOUN
fuelectenerg-900	99	26	(	(	PUNCT
fuelectenerg-900	99	27	i.e.	i.e.	X
fuelectenerg-900	99	28	radial	radial	NOUN
fuelectenerg-900	99	29	for	for	ADP
fuelectenerg-900	99	30	disk	disk	NOUN
fuelectenerg-900	99	31	resonators	resonator	NOUN
fuelectenerg-900	99	32	)	)	PUNCT
fuelectenerg-900	99	33	,	,	PUNCT
fuelectenerg-900	99	34	wine	wine	NOUN
fuelectenerg-900	99	35	-	-	PUNCT
fuelectenerg-900	99	36	glass	glass	NOUN
fuelectenerg-900	99	37	and	and	CCONJ
fuelectenerg-900	99	38	lamé	lamé	NOUN
fuelectenerg-900	99	39	.	.	PUNCT
fuelectenerg-900	100	1	the	the	DET
fuelectenerg-900	100	2	piezoelectric	piezoelectric	ADJ
fuelectenerg-900	100	3	mechanism	mechanism	NOUN
fuelectenerg-900	100	4	of	of	ADP
fuelectenerg-900	100	5	excitation	excitation	NOUN
fuelectenerg-900	100	6	and	and	CCONJ
fuelectenerg-900	100	7	detection	detection	NOUN
fuelectenerg-900	100	8	of	of	ADP
fuelectenerg-900	100	9	mechanical	mechanical	ADJ
fuelectenerg-900	100	10	waves	wave	NOUN
fuelectenerg-900	100	11	is	be	AUX
fuelectenerg-900	100	12	based	base	VERB
fuelectenerg-900	100	13	on	on	ADP
fuelectenerg-900	100	14	the	the	DET
fuelectenerg-900	100	15	use	use	NOUN
fuelectenerg-900	100	16	of	of	ADP
fuelectenerg-900	100	17	piezoelectric	piezoelectric	ADJ
fuelectenerg-900	100	18	materials	material	NOUN
fuelectenerg-900	100	19	which	which	PRON
fuelectenerg-900	100	20	are	be	AUX
fuelectenerg-900	100	21	prone	prone	ADJ
fuelectenerg-900	100	22	to	to	ADP
fuelectenerg-900	100	23	mechanical	mechanical	ADJ
fuelectenerg-900	100	24	deformation	deformation	NOUN
fuelectenerg-900	100	25	in	in	ADP
fuelectenerg-900	100	26	the	the	DET
fuelectenerg-900	100	27	presence	presence	NOUN
fuelectenerg-900	100	28	of	of	ADP
fuelectenerg-900	100	29	an	an	DET
fuelectenerg-900	100	30	electric	electric	ADJ
fuelectenerg-900	100	31	field	field	NOUN
fuelectenerg-900	100	32	(	(	PUNCT
fuelectenerg-900	100	33	inverse	inverse	NOUN
fuelectenerg-900	100	34	pe	pe	PROPN
fuelectenerg-900	100	35	effect	effect	NOUN
fuelectenerg-900	100	36	)	)	PUNCT
fuelectenerg-900	100	37	,	,	PUNCT
fuelectenerg-900	100	38	while	while	SCONJ
fuelectenerg-900	100	39	the	the	DET
fuelectenerg-900	100	40	induced	induced	ADJ
fuelectenerg-900	100	41	mechanical	mechanical	ADJ
fuelectenerg-900	100	42	deformation	deformation	NOUN
fuelectenerg-900	100	43	of	of	ADP
fuelectenerg-900	100	44	the	the	DET
fuelectenerg-900	100	45	material	material	NOUN
fuelectenerg-900	100	46	generates	generate	VERB
fuelectenerg-900	100	47	a	a	DET
fuelectenerg-900	100	48	voltage	voltage	NOUN
fuelectenerg-900	100	49	at	at	ADP
fuelectenerg-900	100	50	the	the	DET
fuelectenerg-900	100	51	output	output	NOUN
fuelectenerg-900	100	52	port	port	NOUN
fuelectenerg-900	100	53	(	(	PUNCT
fuelectenerg-900	100	54	pe	pe	ADP
fuelectenerg-900	100	55	effect	effect	NOUN
fuelectenerg-900	100	56	)	)	PUNCT
fuelectenerg-900	100	57	.	.	PUNCT
fuelectenerg-900	101	1	the	the	DET
fuelectenerg-900	101	2	main	main	ADJ
fuelectenerg-900	101	3	functional	functional	ADJ
fuelectenerg-900	101	4	rf	rf	NOUN
fuelectenerg-900	101	5	mems	mem	NOUN
fuelectenerg-900	101	6	/	/	SYM
fuelectenerg-900	101	7	nems	nem	NOUN
fuelectenerg-900	101	8	resonators	resonator	NOUN
fuelectenerg-900	101	9	for	for	ADP
fuelectenerg-900	101	10	wireless	wireless	ADJ
fuelectenerg-900	101	11	communication	communication	NOUN
fuelectenerg-900	101	12	systems	system	NOUN
fuelectenerg-900	101	13	and	and	CCONJ
fuelectenerg-900	101	14	adsorption	adsorption	NOUN
fuelectenerg-900	101	15	-	-	PUNCT
fuelectenerg-900	101	16	desorption	desorption	NOUN
fuelectenerg-900	101	17	phase	phase	NOUN
fuelectenerg-900	101	18	noise	noise	VERB
fuelectenerg-900	101	19	351	351	NUM
fuelectenerg-900	101	20	components	component	NOUN
fuelectenerg-900	101	21	of	of	ADP
fuelectenerg-900	101	22	the	the	DET
fuelectenerg-900	101	23	resonator	resonator	NOUN
fuelectenerg-900	101	24	are	be	AUX
fuelectenerg-900	101	25	a	a	DET
fuelectenerg-900	101	26	layer	layer	NOUN
fuelectenerg-900	101	27	of	of	ADP
fuelectenerg-900	101	28	a	a	DET
fuelectenerg-900	101	29	pe	pe	X
fuelectenerg-900	101	30	material	material	NOUN
fuelectenerg-900	101	31	(	(	PUNCT
fuelectenerg-900	101	32	e.g.	e.g.	ADV
fuelectenerg-900	101	33	aln	aln	PROPN
fuelectenerg-900	101	34	,	,	PUNCT
fuelectenerg-900	101	35	zno	zno	NOUN
fuelectenerg-900	101	36	,	,	PUNCT
fuelectenerg-900	101	37	lead	lead	ADJ
fuelectenerg-900	101	38	zirconate	zirconate	NOUN
fuelectenerg-900	101	39	titanate	titanate	NOUN
fuelectenerg-900	101	40	(	(	PUNCT
fuelectenerg-900	101	41	pzt	pzt	NOUN
fuelectenerg-900	101	42	)	)	PUNCT
fuelectenerg-900	101	43	)	)	PUNCT
fuelectenerg-900	101	44	,	,	PUNCT
fuelectenerg-900	101	45	reflector	reflector	NOUN
fuelectenerg-900	101	46	structures	structure	NOUN
fuelectenerg-900	101	47	(	(	PUNCT
fuelectenerg-900	101	48	surfaces	surface	NOUN
fuelectenerg-900	101	49	)	)	PUNCT
fuelectenerg-900	101	50	and	and	CCONJ
fuelectenerg-900	101	51	the	the	DET
fuelectenerg-900	101	52	electrodes	electrode	NOUN
fuelectenerg-900	101	53	to	to	PART
fuelectenerg-900	101	54	which	which	PRON
fuelectenerg-900	101	55	the	the	DET
fuelectenerg-900	101	56	driving	drive	VERB
fuelectenerg-900	101	57	electric	electric	ADJ
fuelectenerg-900	101	58	signal	signal	NOUN
fuelectenerg-900	101	59	is	be	AUX
fuelectenerg-900	101	60	applied	apply	VERB
fuelectenerg-900	101	61	,	,	PUNCT
fuelectenerg-900	101	62	or	or	CCONJ
fuelectenerg-900	101	63	which	which	PRON
fuelectenerg-900	101	64	are	be	AUX
fuelectenerg-900	101	65	used	use	VERB
fuelectenerg-900	101	66	to	to	PART
fuelectenerg-900	101	67	detect	detect	VERB
fuelectenerg-900	101	68	the	the	DET
fuelectenerg-900	101	69	generated	generate	VERB
fuelectenerg-900	101	70	voltage	voltage	NOUN
fuelectenerg-900	101	71	(	(	PUNCT
fuelectenerg-900	101	72	figs	fig	NOUN
fuelectenerg-900	101	73	.	.	PUNCT
fuelectenerg-900	101	74	2b	2b	NUM
fuelectenerg-900	101	75	and	and	CCONJ
fuelectenerg-900	101	76	2c	2c	NUM
fuelectenerg-900	101	77	)	)	PUNCT
fuelectenerg-900	101	78	.	.	PUNCT
fuelectenerg-900	102	1	metal	metal	NOUN
fuelectenerg-900	102	2	electrodes	electrode	NOUN
fuelectenerg-900	102	3	are	be	AUX
fuelectenerg-900	102	4	placed	place	VERB
fuelectenerg-900	102	5	directly	directly	ADV
fuelectenerg-900	102	6	on	on	ADP
fuelectenerg-900	102	7	the	the	DET
fuelectenerg-900	102	8	pe	pe	PROPN
fuelectenerg-900	102	9	layer	layer	NOUN
fuelectenerg-900	102	10	.	.	PUNCT
fuelectenerg-900	103	1	pe	pe	PROPN
fuelectenerg-900	103	2	layer	layer	NOUN
fuelectenerg-900	103	3	is	be	AUX
fuelectenerg-900	103	4	usually	usually	ADV
fuelectenerg-900	103	5	in	in	ADP
fuelectenerg-900	103	6	the	the	DET
fuelectenerg-900	103	7	form	form	NOUN
fuelectenerg-900	103	8	of	of	ADP
fuelectenerg-900	103	9	a	a	DET
fuelectenerg-900	103	10	square	square	ADJ
fuelectenerg-900	103	11	,	,	PUNCT
fuelectenerg-900	103	12	rectangular	rectangular	ADJ
fuelectenerg-900	103	13	or	or	CCONJ
fuelectenerg-900	103	14	circular	circular	ADJ
fuelectenerg-900	103	15	plate	plate	NOUN
fuelectenerg-900	103	16	but	but	CCONJ
fuelectenerg-900	103	17	they	they	PRON
fuelectenerg-900	103	18	may	may	AUX
fuelectenerg-900	103	19	also	also	ADV
fuelectenerg-900	103	20	have	have	VERB
fuelectenerg-900	103	21	a	a	DET
fuelectenerg-900	103	22	form	form	NOUN
fuelectenerg-900	103	23	of	of	ADP
fuelectenerg-900	103	24	a	a	DET
fuelectenerg-900	103	25	circular	circular	ADJ
fuelectenerg-900	103	26	or	or	CCONJ
fuelectenerg-900	103	27	square	square	ADJ
fuelectenerg-900	103	28	ring	ring	NOUN
fuelectenerg-900	103	29	.	.	PUNCT
fuelectenerg-900	104	1	driving	drive	VERB
fuelectenerg-900	104	2	electrical	electrical	ADJ
fuelectenerg-900	104	3	signal	signal	NOUN
fuelectenerg-900	104	4	excites	excite	VERB
fuelectenerg-900	104	5	acoustic	acoustic	ADJ
fuelectenerg-900	104	6	waves	wave	NOUN
fuelectenerg-900	104	7	in	in	ADP
fuelectenerg-900	104	8	pe	pe	PROPN
fuelectenerg-900	104	9	material	material	NOUN
fuelectenerg-900	104	10	,	,	PUNCT
fuelectenerg-900	104	11	and	and	CCONJ
fuelectenerg-900	104	12	the	the	DET
fuelectenerg-900	104	13	reflector	reflector	NOUN
fuelectenerg-900	104	14	surfaces	surface	NOUN
fuelectenerg-900	104	15	confine	confine	VERB
fuelectenerg-900	104	16	the	the	DET
fuelectenerg-900	104	17	generated	generate	VERB
fuelectenerg-900	104	18	acoustic	acoustic	ADJ
fuelectenerg-900	104	19	waves	wave	NOUN
fuelectenerg-900	104	20	.	.	PUNCT
fuelectenerg-900	105	1	this	this	PRON
fuelectenerg-900	105	2	enables	enable	VERB
fuelectenerg-900	105	3	the	the	DET
fuelectenerg-900	105	4	acoustic	acoustic	ADJ
fuelectenerg-900	105	5	resonance	resonance	NOUN
fuelectenerg-900	105	6	to	to	PART
fuelectenerg-900	105	7	be	be	AUX
fuelectenerg-900	105	8	established	establish	VERB
fuelectenerg-900	105	9	,	,	PUNCT
fuelectenerg-900	105	10	when	when	SCONJ
fuelectenerg-900	105	11	the	the	DET
fuelectenerg-900	105	12	frequency	frequency	NOUN
fuelectenerg-900	105	13	of	of	ADP
fuelectenerg-900	105	14	the	the	DET
fuelectenerg-900	105	15	excitation	excitation	NOUN
fuelectenerg-900	105	16	electrical	electrical	ADJ
fuelectenerg-900	105	17	signal	signal	NOUN
fuelectenerg-900	105	18	is	be	AUX
fuelectenerg-900	105	19	equal	equal	ADJ
fuelectenerg-900	105	20	to	to	ADP
fuelectenerg-900	105	21	the	the	DET
fuelectenerg-900	105	22	mechanical	mechanical	ADJ
fuelectenerg-900	105	23	resonance	resonance	NOUN
fuelectenerg-900	105	24	frequency	frequency	NOUN
fuelectenerg-900	105	25	determined	determine	VERB
fuelectenerg-900	105	26	by	by	ADP
fuelectenerg-900	105	27	the	the	DET
fuelectenerg-900	105	28	geometry	geometry	NOUN
fuelectenerg-900	105	29	of	of	ADP
fuelectenerg-900	105	30	the	the	DET
fuelectenerg-900	105	31	system	system	NOUN
fuelectenerg-900	105	32	and	and	CCONJ
fuelectenerg-900	105	33	the	the	DET
fuelectenerg-900	105	34	parameters	parameter	NOUN
fuelectenerg-900	105	35	of	of	ADP
fuelectenerg-900	105	36	the	the	DET
fuelectenerg-900	105	37	material	material	NOUN
fuelectenerg-900	105	38	.	.	PUNCT
fuelectenerg-900	106	1	there	there	PRON
fuelectenerg-900	106	2	are	be	VERB
fuelectenerg-900	106	3	several	several	ADJ
fuelectenerg-900	106	4	types	type	NOUN
fuelectenerg-900	106	5	of	of	ADP
fuelectenerg-900	106	6	pe	pe	INTJ
fuelectenerg-900	106	7	rf	rf	NOUN
fuelectenerg-900	106	8	mems	mem	NOUN
fuelectenerg-900	106	9	resonators	resonator	NOUN
fuelectenerg-900	106	10	,	,	PUNCT
fuelectenerg-900	106	11	but	but	CCONJ
fuelectenerg-900	106	12	they	they	PRON
fuelectenerg-900	106	13	can	can	AUX
fuelectenerg-900	106	14	generally	generally	ADV
fuelectenerg-900	106	15	be	be	AUX
fuelectenerg-900	106	16	divided	divide	VERB
fuelectenerg-900	106	17	into	into	ADP
fuelectenerg-900	106	18	saw	saw	NOUN
fuelectenerg-900	106	19	and	and	CCONJ
fuelectenerg-900	106	20	baw	baw	PROPN
fuelectenerg-900	106	21	resonators	resonator	NOUN
fuelectenerg-900	106	22	.	.	PUNCT
fuelectenerg-900	107	1	in	in	ADP
fuelectenerg-900	107	2	a	a	DET
fuelectenerg-900	107	3	saw	saw	NOUN
fuelectenerg-900	107	4	resonator	resonator	NOUN
fuelectenerg-900	107	5	,	,	PUNCT
fuelectenerg-900	107	6	input	input	NOUN
fuelectenerg-900	107	7	and	and	CCONJ
fuelectenerg-900	107	8	output	output	NOUN
fuelectenerg-900	107	9	interdigitated	interdigitate	VERB
fuelectenerg-900	107	10	electrodes	electrode	NOUN
fuelectenerg-900	107	11	and	and	CCONJ
fuelectenerg-900	107	12	reflectors	reflector	NOUN
fuelectenerg-900	107	13	are	be	AUX
fuelectenerg-900	107	14	placed	place	VERB
fuelectenerg-900	107	15	on	on	ADP
fuelectenerg-900	107	16	the	the	DET
fuelectenerg-900	107	17	same	same	ADJ
fuelectenerg-900	107	18	surface	surface	NOUN
fuelectenerg-900	107	19	of	of	ADP
fuelectenerg-900	107	20	the	the	DET
fuelectenerg-900	107	21	pe	pe	PROPN
fuelectenerg-900	107	22	layer	layer	NOUN
fuelectenerg-900	107	23	.	.	PUNCT
fuelectenerg-900	108	1	in	in	ADP
fuelectenerg-900	108	2	baw	baw	PROPN
fuelectenerg-900	108	3	resonators	resonator	NOUN
fuelectenerg-900	108	4	,	,	PUNCT
fuelectenerg-900	108	5	a	a	DET
fuelectenerg-900	108	6	thin	thin	ADJ
fuelectenerg-900	108	7	layer	layer	NOUN
fuelectenerg-900	108	8	of	of	ADP
fuelectenerg-900	108	9	a	a	DET
fuelectenerg-900	108	10	pe	pe	PROPN
fuelectenerg-900	108	11	material	material	NOUN
fuelectenerg-900	108	12	is	be	AUX
fuelectenerg-900	108	13	placed	place	VERB
fuelectenerg-900	108	14	between	between	ADP
fuelectenerg-900	108	15	the	the	DET
fuelectenerg-900	108	16	electrodes	electrode	NOUN
fuelectenerg-900	108	17	.	.	PUNCT
fuelectenerg-900	109	1	in	in	ADP
fuelectenerg-900	109	2	saw	saw	NOUN
fuelectenerg-900	109	3	and	and	CCONJ
fuelectenerg-900	109	4	baw	baw	PROPN
fuelectenerg-900	109	5	resonators	resonator	NOUN
fuelectenerg-900	109	6	,	,	PUNCT
fuelectenerg-900	109	7	mechanical	mechanical	ADJ
fuelectenerg-900	109	8	waves	wave	NOUN
fuelectenerg-900	109	9	are	be	AUX
fuelectenerg-900	109	10	formed	form	VERB
fuelectenerg-900	109	11	on	on	ADP
fuelectenerg-900	109	12	the	the	DET
fuelectenerg-900	109	13	surface	surface	NOUN
fuelectenerg-900	109	14	and	and	CCONJ
fuelectenerg-900	109	15	within	within	ADP
fuelectenerg-900	109	16	the	the	DET
fuelectenerg-900	109	17	volume	volume	NOUN
fuelectenerg-900	109	18	of	of	ADP
fuelectenerg-900	109	19	the	the	DET
fuelectenerg-900	109	20	thin	thin	ADJ
fuelectenerg-900	109	21	layer	layer	NOUN
fuelectenerg-900	109	22	of	of	ADP
fuelectenerg-900	109	23	a	a	DET
fuelectenerg-900	109	24	pe	pe	X
fuelectenerg-900	109	25	material	material	NOUN
fuelectenerg-900	109	26	,	,	PUNCT
fuelectenerg-900	109	27	respectively	respectively	ADV
fuelectenerg-900	109	28	.	.	PUNCT
fuelectenerg-900	110	1	saw	see	VERB
fuelectenerg-900	110	2	resonators	resonator	NOUN
fuelectenerg-900	110	3	usually	usually	ADV
fuelectenerg-900	110	4	oscillate	oscillate	VERB
fuelectenerg-900	110	5	in	in	ADP
fuelectenerg-900	110	6	the	the	DET
fuelectenerg-900	110	7	rayleigh	rayleigh	PROPN
fuelectenerg-900	110	8	mode	mode	NOUN
fuelectenerg-900	110	9	.	.	PUNCT
fuelectenerg-900	111	1	the	the	DET
fuelectenerg-900	111	2	most	most	ADV
fuelectenerg-900	111	3	common	common	ADJ
fuelectenerg-900	111	4	oscillating	oscillate	VERB
fuelectenerg-900	111	5	modes	mode	NOUN
fuelectenerg-900	111	6	in	in	ADP
fuelectenerg-900	111	7	baw	baw	PROPN
fuelectenerg-900	111	8	resonators	resonator	NOUN
fuelectenerg-900	111	9	are	be	AUX
fuelectenerg-900	111	10	the	the	DET
fuelectenerg-900	111	11	bulk	bulk	ADJ
fuelectenerg-900	111	12	extensional	extensional	ADJ
fuelectenerg-900	111	13	mode	mode	NOUN
fuelectenerg-900	111	14	in	in	ADP
fuelectenerg-900	111	15	the	the	DET
fuelectenerg-900	111	16	direction	direction	NOUN
fuelectenerg-900	111	17	of	of	ADP
fuelectenerg-900	111	18	piezolayer	piezolayer	NOUN
fuelectenerg-900	111	19	thickness	thickness	NOUN
fuelectenerg-900	111	20	,	,	PUNCT
fuelectenerg-900	111	21	i.e.	i.e.	X
fuelectenerg-900	111	22	the	the	DET
fuelectenerg-900	111	23	direction	direction	NOUN
fuelectenerg-900	111	24	of	of	ADP
fuelectenerg-900	111	25	the	the	DET
fuelectenerg-900	111	26	excitation	excitation	NOUN
fuelectenerg-900	111	27	electrical	electrical	ADJ
fuelectenerg-900	111	28	field	field	NOUN
fuelectenerg-900	111	29	(	(	PUNCT
fuelectenerg-900	111	30	such	such	ADJ
fuelectenerg-900	111	31	as	as	ADP
fuelectenerg-900	111	32	in	in	ADP
fuelectenerg-900	111	33	fbars	fbar	NOUN
fuelectenerg-900	111	34	–	–	PUNCT
fuelectenerg-900	111	35	thin	thin	ADJ
fuelectenerg-900	111	36	film	film	NOUN
fuelectenerg-900	111	37	bulk	bulk	ADJ
fuelectenerg-900	111	38	acoustic	acoustic	ADJ
fuelectenerg-900	111	39	resonators	resonator	NOUN
fuelectenerg-900	111	40	)	)	PUNCT
fuelectenerg-900	111	41	,	,	PUNCT
fuelectenerg-900	111	42	or	or	CCONJ
fuelectenerg-900	111	43	the	the	DET
fuelectenerg-900	111	44	lateral	lateral	ADJ
fuelectenerg-900	111	45	extensional	extensional	ADJ
fuelectenerg-900	111	46	mode	mode	NOUN
fuelectenerg-900	111	47	(	(	PUNCT
fuelectenerg-900	111	48	in	in	ADP
fuelectenerg-900	111	49	lbars	lbar	NOUN
fuelectenerg-900	111	50	–	–	PUNCT
fuelectenerg-900	111	51	lateral	lateral	ADJ
fuelectenerg-900	111	52	bars	bar	NOUN
fuelectenerg-900	111	53	)	)	PUNCT
fuelectenerg-900	111	54	.	.	PUNCT
fuelectenerg-900	112	1	the	the	DET
fuelectenerg-900	112	2	resonance	resonance	NOUN
fuelectenerg-900	112	3	frequency	frequency	NOUN
fuelectenerg-900	112	4	of	of	ADP
fuelectenerg-900	112	5	fbar	fbar	PROPN
fuelectenerg-900	112	6	depends	depend	VERB
fuelectenerg-900	112	7	on	on	ADP
fuelectenerg-900	112	8	the	the	DET
fuelectenerg-900	112	9	thickness	thickness	NOUN
fuelectenerg-900	112	10	of	of	ADP
fuelectenerg-900	112	11	the	the	DET
fuelectenerg-900	112	12	pe	pe	PROPN
fuelectenerg-900	112	13	layer	layer	NOUN
fuelectenerg-900	112	14	.	.	PUNCT
fuelectenerg-900	113	1	the	the	DET
fuelectenerg-900	113	2	fbar	fbar	NOUN
fuelectenerg-900	113	3	resonance	resonance	NOUN
fuelectenerg-900	113	4	in	in	ADP
fuelectenerg-900	113	5	the	the	DET
fuelectenerg-900	113	6	range	range	NOUN
fuelectenerg-900	113	7	of	of	ADP
fuelectenerg-900	113	8	lower	low	ADJ
fuelectenerg-900	113	9	ghz	ghz	NOUN
fuelectenerg-900	113	10	frequencies	frequency	NOUN
fuelectenerg-900	113	11	is	be	AUX
fuelectenerg-900	113	12	formed	form	VERB
fuelectenerg-900	113	13	in	in	ADP
fuelectenerg-900	113	14	the	the	DET
fuelectenerg-900	113	15	layers	layer	NOUN
fuelectenerg-900	113	16	of	of	ADP
fuelectenerg-900	113	17	the	the	DET
fuelectenerg-900	113	18	pe	pe	PROPN
fuelectenerg-900	113	19	material	material	NOUN
fuelectenerg-900	113	20	reaching	reach	VERB
fuelectenerg-900	113	21	about	about	ADV
fuelectenerg-900	113	22	1	1	NUM
fuelectenerg-900	113	23	μm	μm	NOUN
fuelectenerg-900	113	24	in	in	ADP
fuelectenerg-900	113	25	thickness	thickness	NOUN
fuelectenerg-900	113	26	,	,	PUNCT
fuelectenerg-900	113	27	whereas	whereas	SCONJ
fuelectenerg-900	113	28	the	the	DET
fuelectenerg-900	113	29	lateral	lateral	ADJ
fuelectenerg-900	113	30	dimension	dimension	NOUN
fuelectenerg-900	113	31	of	of	ADP
fuelectenerg-900	113	32	the	the	DET
fuelectenerg-900	113	33	resonator	resonator	NOUN
fuelectenerg-900	113	34	are	be	AUX
fuelectenerg-900	113	35	of	of	ADP
fuelectenerg-900	113	36	the	the	DET
fuelectenerg-900	113	37	order	order	NOUN
fuelectenerg-900	113	38	of	of	ADP
fuelectenerg-900	113	39	10	10	NUM
fuelectenerg-900	113	40	-	-	SYM
fuelectenerg-900	113	41	100	100	NUM
fuelectenerg-900	113	42	μm	μm	NOUN
fuelectenerg-900	113	43	.	.	PUNCT
fuelectenerg-900	114	1	the	the	DET
fuelectenerg-900	114	2	lateral	lateral	ADJ
fuelectenerg-900	114	3	extension	extension	NOUN
fuelectenerg-900	114	4	modes	mode	NOUN
fuelectenerg-900	114	5	may	may	AUX
fuelectenerg-900	114	6	be	be	AUX
fuelectenerg-900	114	7	along	along	ADP
fuelectenerg-900	114	8	one	one	NUM
fuelectenerg-900	114	9	direction	direction	NOUN
fuelectenerg-900	114	10	or	or	CCONJ
fuelectenerg-900	114	11	a	a	DET
fuelectenerg-900	114	12	contour	contour	NOUN
fuelectenerg-900	114	13	,	,	PUNCT
fuelectenerg-900	114	14	whereas	whereas	SCONJ
fuelectenerg-900	114	15	the	the	DET
fuelectenerg-900	114	16	resonance	resonance	NOUN
fuelectenerg-900	114	17	frequency	frequency	NOUN
fuelectenerg-900	114	18	is	be	AUX
fuelectenerg-900	114	19	determined	determine	VERB
fuelectenerg-900	114	20	by	by	ADP
fuelectenerg-900	114	21	the	the	DET
fuelectenerg-900	114	22	lateral	lateral	ADJ
fuelectenerg-900	114	23	dimensions	dimension	NOUN
fuelectenerg-900	114	24	(	(	PUNCT
fuelectenerg-900	114	25	e.g.	e.g.	ADV
fuelectenerg-900	114	26	the	the	DET
fuelectenerg-900	114	27	width	width	NOUN
fuelectenerg-900	114	28	of	of	ADP
fuelectenerg-900	114	29	the	the	DET
fuelectenerg-900	114	30	ring	ring	NOUN
fuelectenerg-900	114	31	acting	act	VERB
fuelectenerg-900	114	32	as	as	ADP
fuelectenerg-900	114	33	the	the	DET
fuelectenerg-900	114	34	resonant	resonant	ADJ
fuelectenerg-900	114	35	structure	structure	NOUN
fuelectenerg-900	114	36	)	)	PUNCT
fuelectenerg-900	114	37	.	.	PUNCT
fuelectenerg-900	115	1	the	the	DET
fuelectenerg-900	115	2	lateral	lateral	ADJ
fuelectenerg-900	115	3	bulk	bulk	ADJ
fuelectenerg-900	115	4	modes	mode	NOUN
fuelectenerg-900	115	5	can	can	AUX
fuelectenerg-900	115	6	also	also	ADV
fuelectenerg-900	115	7	be	be	AUX
fuelectenerg-900	115	8	formed	form	VERB
fuelectenerg-900	115	9	in	in	ADP
fuelectenerg-900	115	10	hybrid	hybrid	ADJ
fuelectenerg-900	115	11	saw	saw	NOUN
fuelectenerg-900	115	12	-	-	PUNCT
fuelectenerg-900	115	13	baw	baw	NOUN
fuelectenerg-900	115	14	structures	structure	NOUN
fuelectenerg-900	115	15	,	,	PUNCT
fuelectenerg-900	115	16	in	in	ADP
fuelectenerg-900	115	17	which	which	PRON
fuelectenerg-900	115	18	the	the	DET
fuelectenerg-900	115	19	direction	direction	NOUN
fuelectenerg-900	115	20	of	of	ADP
fuelectenerg-900	115	21	the	the	DET
fuelectenerg-900	115	22	excitation	excitation	NOUN
fuelectenerg-900	115	23	electric	electric	ADJ
fuelectenerg-900	115	24	field	field	NOUN
fuelectenerg-900	115	25	belongs	belong	VERB
fuelectenerg-900	115	26	to	to	ADP
fuelectenerg-900	115	27	the	the	DET
fuelectenerg-900	115	28	lateral	lateral	ADJ
fuelectenerg-900	115	29	plane	plane	NOUN
fuelectenerg-900	115	30	(	(	PUNCT
fuelectenerg-900	115	31	lfer	lfer	NOUN
fuelectenerg-900	115	32	–	–	PUNCT
fuelectenerg-900	115	33	lateral	lateral	ADJ
fuelectenerg-900	115	34	field	field	NOUN
fuelectenerg-900	115	35	-	-	PUNCT
fuelectenerg-900	115	36	excited	excite	VERB
fuelectenerg-900	115	37	resonator	resonator	NOUN
fuelectenerg-900	115	38	)	)	PUNCT
fuelectenerg-900	115	39	.	.	PUNCT
fuelectenerg-900	116	1	the	the	DET
fuelectenerg-900	116	2	interdigitated	interdigitate	VERB
fuelectenerg-900	116	3	electrodes	electrode	NOUN
fuelectenerg-900	116	4	of	of	ADP
fuelectenerg-900	116	5	these	these	DET
fuelectenerg-900	116	6	resonators	resonator	NOUN
fuelectenerg-900	116	7	are	be	AUX
fuelectenerg-900	116	8	located	locate	VERB
fuelectenerg-900	116	9	on	on	ADP
fuelectenerg-900	116	10	a	a	DET
fuelectenerg-900	116	11	single	single	ADJ
fuelectenerg-900	116	12	surface	surface	NOUN
fuelectenerg-900	116	13	of	of	ADP
fuelectenerg-900	116	14	the	the	DET
fuelectenerg-900	116	15	pe	pe	PROPN
fuelectenerg-900	116	16	layer	layer	NOUN
fuelectenerg-900	116	17	(	(	PUNCT
fuelectenerg-900	116	18	just	just	ADV
fuelectenerg-900	116	19	like	like	INTJ
fuelectenerg-900	116	20	in	in	ADP
fuelectenerg-900	116	21	a	a	DET
fuelectenerg-900	116	22	saw	saw	NOUN
fuelectenerg-900	116	23	resonator	resonator	NOUN
fuelectenerg-900	116	24	)	)	PUNCT
fuelectenerg-900	116	25	,	,	PUNCT
fuelectenerg-900	116	26	bulk	bulk	NOUN
fuelectenerg-900	116	27	standing	stand	VERB
fuelectenerg-900	116	28	acoustic	acoustic	ADJ
fuelectenerg-900	116	29	waves	wave	NOUN
fuelectenerg-900	116	30	are	be	AUX
fuelectenerg-900	116	31	formed	form	VERB
fuelectenerg-900	116	32	(	(	PUNCT
fuelectenerg-900	116	33	as	as	ADP
fuelectenerg-900	116	34	in	in	ADP
fuelectenerg-900	116	35	baw	baw	NOUN
fuelectenerg-900	116	36	resonators	resonator	NOUN
fuelectenerg-900	116	37	)	)	PUNCT
fuelectenerg-900	116	38	,	,	PUNCT
fuelectenerg-900	116	39	whereas	whereas	SCONJ
fuelectenerg-900	116	40	the	the	DET
fuelectenerg-900	116	41	resonance	resonance	NOUN
fuelectenerg-900	116	42	frequency	frequency	NOUN
fuelectenerg-900	116	43	is	be	AUX
fuelectenerg-900	116	44	determined	determine	VERB
fuelectenerg-900	116	45	by	by	ADP
fuelectenerg-900	116	46	the	the	DET
fuelectenerg-900	116	47	distance	distance	NOUN
fuelectenerg-900	116	48	between	between	ADP
fuelectenerg-900	116	49	two	two	NUM
fuelectenerg-900	116	50	adjacent	adjacent	ADJ
fuelectenerg-900	116	51	"	"	PUNCT
fuelectenerg-900	116	52	fingers	finger	NOUN
fuelectenerg-900	116	53	"	"	PUNCT
fuelectenerg-900	116	54	of	of	ADP
fuelectenerg-900	116	55	interdigital	interdigital	ADJ
fuelectenerg-900	116	56	electrodes	electrode	NOUN
fuelectenerg-900	116	57	(	(	PUNCT
fuelectenerg-900	116	58	the	the	DET
fuelectenerg-900	116	59	lateral	lateral	ADJ
fuelectenerg-900	116	60	dimension	dimension	NOUN
fuelectenerg-900	116	61	,	,	PUNCT
fuelectenerg-900	116	62	as	as	ADP
fuelectenerg-900	116	63	in	in	ADP
fuelectenerg-900	116	64	saw	saw	NOUN
fuelectenerg-900	116	65	resonators	resonator	NOUN
fuelectenerg-900	116	66	)	)	PUNCT
fuelectenerg-900	116	67	.	.	PUNCT
fuelectenerg-900	117	1	less	less	ADV
fuelectenerg-900	117	2	commonly	commonly	ADV
fuelectenerg-900	117	3	,	,	PUNCT
fuelectenerg-900	117	4	pe	pe	PRON
fuelectenerg-900	117	5	actuation	actuation	NOUN
fuelectenerg-900	117	6	is	be	AUX
fuelectenerg-900	117	7	used	use	VERB
fuelectenerg-900	117	8	to	to	PART
fuelectenerg-900	117	9	excite	excite	VERB
fuelectenerg-900	117	10	the	the	DET
fuelectenerg-900	117	11	flexural	flexural	ADJ
fuelectenerg-900	117	12	modes	mode	NOUN
fuelectenerg-900	117	13	of	of	ADP
fuelectenerg-900	117	14	oscillation	oscillation	NOUN
fuelectenerg-900	117	15	of	of	ADP
fuelectenerg-900	117	16	suspended	suspend	VERB
fuelectenerg-900	117	17	resonant	resonant	NOUN
fuelectenerg-900	117	18	structures	structure	NOUN
fuelectenerg-900	117	19	comprising	comprise	VERB
fuelectenerg-900	117	20	a	a	DET
fuelectenerg-900	117	21	layer(s	layer(s	NOUN
fuelectenerg-900	117	22	)	)	PUNCT
fuelectenerg-900	117	23	of	of	ADP
fuelectenerg-900	117	24	pe	pe	PROPN
fuelectenerg-900	117	25	material	material	NOUN
fuelectenerg-900	117	26	[	[	X
fuelectenerg-900	117	27	5	5	NUM
fuelectenerg-900	117	28	]	]	PUNCT
fuelectenerg-900	117	29	.	.	PUNCT
fuelectenerg-900	118	1	in	in	ADP
fuelectenerg-900	118	2	the	the	DET
fuelectenerg-900	118	3	piezoelectric	piezoelectric	ADJ
fuelectenerg-900	118	4	mechanism	mechanism	NOUN
fuelectenerg-900	118	5	of	of	ADP
fuelectenerg-900	118	6	energy	energy	NOUN
fuelectenerg-900	118	7	conversion	conversion	NOUN
fuelectenerg-900	118	8	,	,	PUNCT
fuelectenerg-900	118	9	the	the	DET
fuelectenerg-900	118	10	coefficient	coefficient	NOUN
fuelectenerg-900	118	11	of	of	ADP
fuelectenerg-900	118	12	em	em	PRON
fuelectenerg-900	118	13	coupling	couple	VERB
fuelectenerg-900	118	14	is	be	AUX
fuelectenerg-900	118	15	larger	large	ADJ
fuelectenerg-900	118	16	than	than	ADP
fuelectenerg-900	118	17	in	in	ADP
fuelectenerg-900	118	18	the	the	DET
fuelectenerg-900	118	19	capacitive	capacitive	ADJ
fuelectenerg-900	118	20	mechanism	mechanism	NOUN
fuelectenerg-900	118	21	,	,	PUNCT
fuelectenerg-900	118	22	for	for	ADP
fuelectenerg-900	118	23	resonators	resonator	NOUN
fuelectenerg-900	118	24	of	of	ADP
fuelectenerg-900	118	25	similar	similar	ADJ
fuelectenerg-900	118	26	shape	shape	NOUN
fuelectenerg-900	118	27	and	and	CCONJ
fuelectenerg-900	118	28	size	size	NOUN
fuelectenerg-900	118	29	.	.	PUNCT
fuelectenerg-900	119	1	it	it	PRON
fuelectenerg-900	119	2	is	be	AUX
fuelectenerg-900	119	3	greater	great	ADJ
fuelectenerg-900	119	4	in	in	ADP
fuelectenerg-900	119	5	fbar	fbar	NOUN
fuelectenerg-900	119	6	resonators	resonator	NOUN
fuelectenerg-900	119	7	than	than	ADP
fuelectenerg-900	119	8	in	in	ADP
fuelectenerg-900	119	9	lbars	lbar	NOUN
fuelectenerg-900	119	10	.	.	PUNCT
fuelectenerg-900	120	1	aln	aln	PROPN
fuelectenerg-900	120	2	resonators	resonator	NOUN
fuelectenerg-900	120	3	have	have	VERB
fuelectenerg-900	120	4	a	a	DET
fuelectenerg-900	120	5	slightly	slightly	ADV
fuelectenerg-900	120	6	smaller	small	ADJ
fuelectenerg-900	120	7	coupling	coupling	NOUN
fuelectenerg-900	120	8	coefficient	coefficient	NOUN
fuelectenerg-900	120	9	than	than	ADP
fuelectenerg-900	120	10	zno	zno	NOUN
fuelectenerg-900	120	11	and	and	CCONJ
fuelectenerg-900	120	12	pzt	pzt	ADJ
fuelectenerg-900	120	13	components	component	NOUN
fuelectenerg-900	120	14	,	,	PUNCT
fuelectenerg-900	120	15	but	but	CCONJ
fuelectenerg-900	120	16	their	their	PRON
fuelectenerg-900	120	17	piezoelectric	piezoelectric	NOUN
fuelectenerg-900	120	18	properties	property	NOUN
fuelectenerg-900	120	19	are	be	AUX
fuelectenerg-900	120	20	excellent	excellent	ADJ
fuelectenerg-900	120	21	and	and	CCONJ
fuelectenerg-900	120	22	they	they	PRON
fuelectenerg-900	120	23	are	be	AUX
fuelectenerg-900	120	24	suitable	suitable	ADJ
fuelectenerg-900	120	25	for	for	ADP
fuelectenerg-900	120	26	high	high	ADJ
fuelectenerg-900	120	27	-	-	PUNCT
fuelectenerg-900	120	28	frequency	frequency	NOUN
fuelectenerg-900	120	29	applications	application	NOUN
fuelectenerg-900	120	30	[	[	X
fuelectenerg-900	120	31	6	6	NUM
fuelectenerg-900	120	32	]	]	PUNCT
fuelectenerg-900	120	33	.	.	PUNCT
fuelectenerg-900	121	1	the	the	DET
fuelectenerg-900	121	2	mechanical	mechanical	ADJ
fuelectenerg-900	121	3	resonant	resonant	ADJ
fuelectenerg-900	121	4	frequency	frequency	NOUN
fuelectenerg-900	121	5	of	of	ADP
fuelectenerg-900	121	6	the	the	DET
fuelectenerg-900	121	7	structure	structure	NOUN
fuelectenerg-900	121	8	is	be	AUX
fuelectenerg-900	121	9	determined	determine	VERB
fuelectenerg-900	121	10	by	by	ADP
fuelectenerg-900	121	11	its	its	PRON
fuelectenerg-900	121	12	stiffness	stiffness	NOUN
fuelectenerg-900	121	13	and	and	CCONJ
fuelectenerg-900	121	14	mass	mass	ADJ
fuelectenerg-900	121	15	,	,	PUNCT
fuelectenerg-900	121	16	i.e.	i.e.	X
fuelectenerg-900	121	17	by	by	ADP
fuelectenerg-900	121	18	its	its	PRON
fuelectenerg-900	121	19	geometry	geometry	NOUN
fuelectenerg-900	121	20	,	,	PUNCT
fuelectenerg-900	121	21	dimensions	dimension	NOUN
fuelectenerg-900	121	22	and	and	CCONJ
fuelectenerg-900	121	23	material	material	NOUN
fuelectenerg-900	121	24	parameters	parameter	NOUN
fuelectenerg-900	121	25	.	.	PUNCT
fuelectenerg-900	122	1	the	the	DET
fuelectenerg-900	122	2	q	q	NOUN
fuelectenerg-900	122	3	factor	factor	NOUN
fuelectenerg-900	122	4	of	of	ADP
fuelectenerg-900	122	5	the	the	DET
fuelectenerg-900	122	6	resonator	resonator	NOUN
fuelectenerg-900	122	7	(	(	PUNCT
fuelectenerg-900	122	8	unloaded	unload	VERB
fuelectenerg-900	122	9	q	q	NOUN
fuelectenerg-900	122	10	)	)	PUNCT
fuelectenerg-900	122	11	is	be	AUX
fuelectenerg-900	122	12	by	by	ADP
fuelectenerg-900	122	13	definition	definition	NOUN
fuelectenerg-900	122	14	equal	equal	ADJ
fuelectenerg-900	122	15	to	to	ADP
fuelectenerg-900	122	16	the	the	DET
fuelectenerg-900	122	17	ratio	ratio	NOUN
fuelectenerg-900	122	18	of	of	ADP
fuelectenerg-900	122	19	the	the	DET
fuelectenerg-900	122	20	energy	energy	NOUN
fuelectenerg-900	122	21	stored	store	VERB
fuelectenerg-900	122	22	in	in	ADP
fuelectenerg-900	122	23	the	the	DET
fuelectenerg-900	122	24	resonator	resonator	NOUN
fuelectenerg-900	122	25	and	and	CCONJ
fuelectenerg-900	122	26	the	the	DET
fuelectenerg-900	122	27	energy	energy	NOUN
fuelectenerg-900	122	28	lost	lose	VERB
fuelectenerg-900	122	29	per	per	ADP
fuelectenerg-900	122	30	one	one	NUM
fuelectenerg-900	122	31	cycle	cycle	NOUN
fuelectenerg-900	122	32	of	of	ADP
fuelectenerg-900	122	33	oscillation	oscillation	NOUN
fuelectenerg-900	122	34	.	.	PUNCT
fuelectenerg-900	123	1	a	a	DET
fuelectenerg-900	123	2	high	high	ADJ
fuelectenerg-900	123	3	resonator	resonator	NOUN
fuelectenerg-900	123	4	q	q	NOUN
fuelectenerg-900	123	5	results	result	NOUN
fuelectenerg-900	123	6	in	in	ADP
fuelectenerg-900	123	7	low	low	ADJ
fuelectenerg-900	123	8	resonator	resonator	NOUN
fuelectenerg-900	123	9	impedance	impedance	NOUN
fuelectenerg-900	123	10	(	(	PUNCT
fuelectenerg-900	123	11	i.e.	i.e.	X
fuelectenerg-900	123	12	series	series	NOUN
fuelectenerg-900	123	13	resistance	resistance	PROPN
fuelectenerg-900	123	14	)	)	PUNCT
fuelectenerg-900	123	15	.	.	PUNCT
fuelectenerg-900	124	1	the	the	DET
fuelectenerg-900	124	2	fulfillment	fulfillment	NOUN
fuelectenerg-900	124	3	of	of	ADP
fuelectenerg-900	124	4	requirements	requirement	NOUN
fuelectenerg-900	124	5	to	to	PART
fuelectenerg-900	124	6	be	be	AUX
fuelectenerg-900	124	7	met	meet	VERB
fuelectenerg-900	124	8	by	by	ADP
fuelectenerg-900	124	9	an	an	DET
fuelectenerg-900	124	10	oscillator	oscillator	NOUN
fuelectenerg-900	124	11	in	in	ADP
fuelectenerg-900	124	12	terms	term	NOUN
fuelectenerg-900	124	13	of	of	ADP
fuelectenerg-900	124	14	phase	phase	NOUN
fuelectenerg-900	124	15	noise	noise	NOUN
fuelectenerg-900	124	16	and	and	CCONJ
fuelectenerg-900	124	17	frequency	frequency	NOUN
fuelectenerg-900	124	18	stability	stability	NOUN
fuelectenerg-900	124	19	,	,	PUNCT
fuelectenerg-900	124	20	as	as	ADV
fuelectenerg-900	124	21	well	well	ADV
fuelectenerg-900	124	22	as	as	ADP
fuelectenerg-900	124	23	the	the	DET
fuelectenerg-900	124	24	filter	filter	NOUN
fuelectenerg-900	124	25	insertion	insertion	NOUN
fuelectenerg-900	124	26	loss	loss	NOUN
fuelectenerg-900	124	27	and	and	CCONJ
fuelectenerg-900	124	28	selectivity	selectivity	NOUN
fuelectenerg-900	124	29	,	,	PUNCT
fuelectenerg-900	124	30	power	power	NOUN
fuelectenerg-900	124	31	dissipation	dissipation	NOUN
fuelectenerg-900	124	32	,	,	PUNCT
fuelectenerg-900	124	33	etc	etc	X
fuelectenerg-900	124	34	.	.	X
fuelectenerg-900	124	35	also	also	ADV
fuelectenerg-900	124	36	depend	depend	VERB
fuelectenerg-900	124	37	on	on	ADP
fuelectenerg-900	124	38	the	the	DET
fuelectenerg-900	124	39	q	q	NOUN
fuelectenerg-900	124	40	value	value	NOUN
fuelectenerg-900	124	41	.	.	PUNCT
fuelectenerg-900	125	1	the	the	DET
fuelectenerg-900	125	2	value	value	NOUN
fuelectenerg-900	125	3	of	of	ADP
fuelectenerg-900	125	4	q	q	NOUN
fuelectenerg-900	125	5	is	be	AUX
fuelectenerg-900	125	6	determined	determine	VERB
fuelectenerg-900	125	7	by	by	ADP
fuelectenerg-900	125	8	different	different	ADJ
fuelectenerg-900	125	9	mechanisms	mechanism	NOUN
fuelectenerg-900	125	10	of	of	ADP
fuelectenerg-900	125	11	energy	energy	NOUN
fuelectenerg-900	125	12	loss	loss	NOUN
fuelectenerg-900	125	13	,	,	PUNCT
fuelectenerg-900	125	14	both	both	CCONJ
fuelectenerg-900	125	15	internal	internal	ADJ
fuelectenerg-900	125	16	and	and	CCONJ
fuelectenerg-900	125	17	352	352	NUM
fuelectenerg-900	125	18	i.	i.	NOUN
fuelectenerg-900	125	19	jokić	jokić	PROPN
fuelectenerg-900	125	20	,	,	PUNCT
fuelectenerg-900	125	21	m.	m.	NOUN
fuelectenerg-900	125	22	frantlović	frantlović	NOUN
fuelectenerg-900	125	23	,	,	PUNCT
fuelectenerg-900	125	24	z.	z.	PROPN
fuelectenerg-900	125	25	djurić	djurić	PROPN
fuelectenerg-900	125	26	,	,	PUNCT
fuelectenerg-900	125	27	m.	m.	NOUN
fuelectenerg-900	125	28	l.	l.	PROPN
fuelectenerg-900	125	29	dukić	dukić	PROPN
fuelectenerg-900	125	30	external	external	PROPN
fuelectenerg-900	125	31	.	.	PUNCT
fuelectenerg-900	126	1	external	external	ADJ
fuelectenerg-900	126	2	loss	loss	NOUN
fuelectenerg-900	126	3	mechanisms	mechanism	NOUN
fuelectenerg-900	126	4	may	may	AUX
fuelectenerg-900	126	5	include	include	VERB
fuelectenerg-900	126	6	the	the	DET
fuelectenerg-900	126	7	loss	loss	NOUN
fuelectenerg-900	126	8	of	of	ADP
fuelectenerg-900	126	9	mechanical	mechanical	ADJ
fuelectenerg-900	126	10	energy	energy	NOUN
fuelectenerg-900	126	11	in	in	ADP
fuelectenerg-900	126	12	places	place	NOUN
fuelectenerg-900	126	13	where	where	SCONJ
fuelectenerg-900	126	14	the	the	DET
fuelectenerg-900	126	15	resonant	resonant	ADJ
fuelectenerg-900	126	16	structure	structure	NOUN
fuelectenerg-900	126	17	is	be	AUX
fuelectenerg-900	126	18	fixed	fix	VERB
fuelectenerg-900	126	19	during	during	ADP
fuelectenerg-900	126	20	oscillation	oscillation	NOUN
fuelectenerg-900	126	21	,	,	PUNCT
fuelectenerg-900	126	22	or	or	CCONJ
fuelectenerg-900	126	23	they	they	PRON
fuelectenerg-900	126	24	can	can	AUX
fuelectenerg-900	126	25	be	be	AUX
fuelectenerg-900	126	26	a	a	DET
fuelectenerg-900	126	27	result	result	NOUN
fuelectenerg-900	126	28	of	of	ADP
fuelectenerg-900	126	29	the	the	DET
fuelectenerg-900	126	30	presence	presence	NOUN
fuelectenerg-900	126	31	of	of	ADP
fuelectenerg-900	126	32	the	the	DET
fuelectenerg-900	126	33	surrounding	surround	VERB
fuelectenerg-900	126	34	medium	medium	NOUN
fuelectenerg-900	126	35	(	(	PUNCT
fuelectenerg-900	126	36	e.g.	e.g.	ADV
fuelectenerg-900	126	37	air	air	NOUN
fuelectenerg-900	126	38	or	or	CCONJ
fuelectenerg-900	126	39	other	other	ADJ
fuelectenerg-900	126	40	gas	gas	NOUN
fuelectenerg-900	126	41	mixtures	mixture	NOUN
fuelectenerg-900	126	42	)	)	PUNCT
fuelectenerg-900	126	43	or	or	CCONJ
fuelectenerg-900	126	44	external	external	ADJ
fuelectenerg-900	126	45	circuits	circuit	NOUN
fuelectenerg-900	126	46	.	.	PUNCT
fuelectenerg-900	127	1	as	as	ADP
fuelectenerg-900	127	2	for	for	ADP
fuelectenerg-900	127	3	internal	internal	ADJ
fuelectenerg-900	127	4	mechanisms	mechanism	NOUN
fuelectenerg-900	127	5	,	,	PUNCT
fuelectenerg-900	127	6	mechanical	mechanical	ADJ
fuelectenerg-900	127	7	energy	energy	NOUN
fuelectenerg-900	127	8	is	be	AUX
fuelectenerg-900	127	9	dissipated	dissipate	VERB
fuelectenerg-900	127	10	in	in	ADP
fuelectenerg-900	127	11	the	the	DET
fuelectenerg-900	127	12	resonator	resonator	NOUN
fuelectenerg-900	127	13	or	or	CCONJ
fuelectenerg-900	127	14	on	on	ADP
fuelectenerg-900	127	15	the	the	DET
fuelectenerg-900	127	16	surface	surface	NOUN
fuelectenerg-900	127	17	of	of	ADP
fuelectenerg-900	127	18	the	the	DET
fuelectenerg-900	127	19	resonant	resonant	ADJ
fuelectenerg-900	127	20	structure	structure	NOUN
fuelectenerg-900	127	21	as	as	ADP
fuelectenerg-900	127	22	a	a	DET
fuelectenerg-900	127	23	result	result	NOUN
fuelectenerg-900	127	24	of	of	ADP
fuelectenerg-900	127	25	the	the	DET
fuelectenerg-900	127	26	presence	presence	NOUN
fuelectenerg-900	127	27	of	of	ADP
fuelectenerg-900	127	28	the	the	DET
fuelectenerg-900	127	29	bulk	bulk	ADJ
fuelectenerg-900	127	30	and	and	CCONJ
fuelectenerg-900	127	31	surface	surface	NOUN
fuelectenerg-900	127	32	defects	defect	NOUN
fuelectenerg-900	127	33	,	,	PUNCT
fuelectenerg-900	127	34	and	and	CCONJ
fuelectenerg-900	127	35	thermoelastic	thermoelastic	ADJ
fuelectenerg-900	127	36	effects	effect	NOUN
fuelectenerg-900	127	37	that	that	PRON
fuelectenerg-900	127	38	lead	lead	VERB
fuelectenerg-900	127	39	to	to	ADP
fuelectenerg-900	127	40	the	the	DET
fuelectenerg-900	127	41	irreversible	irreversible	ADJ
fuelectenerg-900	127	42	transformation	transformation	NOUN
fuelectenerg-900	127	43	of	of	ADP
fuelectenerg-900	127	44	acoustic	acoustic	ADJ
fuelectenerg-900	127	45	energy	energy	NOUN
fuelectenerg-900	127	46	into	into	ADP
fuelectenerg-900	127	47	heat	heat	NOUN
fuelectenerg-900	127	48	[	[	X
fuelectenerg-900	127	49	3	3	NUM
fuelectenerg-900	127	50	]	]	PUNCT
fuelectenerg-900	127	51	.	.	PUNCT
fuelectenerg-900	128	1	with	with	ADP
fuelectenerg-900	128	2	the	the	DET
fuelectenerg-900	128	3	increase	increase	NOUN
fuelectenerg-900	128	4	of	of	ADP
fuelectenerg-900	128	5	gas	gas	NOUN
fuelectenerg-900	128	6	pressure	pressure	NOUN
fuelectenerg-900	128	7	in	in	ADP
fuelectenerg-900	128	8	the	the	DET
fuelectenerg-900	128	9	surrounding	surround	VERB
fuelectenerg-900	128	10	medium	medium	NOUN
fuelectenerg-900	128	11	inside	inside	ADP
fuelectenerg-900	128	12	the	the	DET
fuelectenerg-900	128	13	resonator	resonator	NOUN
fuelectenerg-900	128	14	cavity	cavity	NOUN
fuelectenerg-900	128	15	,	,	PUNCT
fuelectenerg-900	128	16	the	the	DET
fuelectenerg-900	128	17	energy	energy	NOUN
fuelectenerg-900	128	18	loss	loss	NOUN
fuelectenerg-900	128	19	due	due	ADP
fuelectenerg-900	128	20	to	to	ADP
fuelectenerg-900	128	21	the	the	DET
fuelectenerg-900	128	22	gas	gas	NOUN
fuelectenerg-900	128	23	damping	damp	VERB
fuelectenerg-900	128	24	can	can	AUX
fuelectenerg-900	128	25	grow	grow	VERB
fuelectenerg-900	128	26	and	and	CCONJ
fuelectenerg-900	128	27	prevail	prevail	VERB
fuelectenerg-900	128	28	over	over	ADP
fuelectenerg-900	128	29	losses	loss	NOUN
fuelectenerg-900	128	30	caused	cause	VERB
fuelectenerg-900	128	31	by	by	ADP
fuelectenerg-900	128	32	other	other	ADJ
fuelectenerg-900	128	33	mechanisms	mechanism	NOUN
fuelectenerg-900	128	34	.	.	PUNCT
fuelectenerg-900	129	1	therefore	therefore	ADV
fuelectenerg-900	129	2	,	,	PUNCT
fuelectenerg-900	129	3	it	it	PRON
fuelectenerg-900	129	4	is	be	AUX
fuelectenerg-900	129	5	usually	usually	ADV
fuelectenerg-900	129	6	necessary	necessary	ADJ
fuelectenerg-900	129	7	to	to	PART
fuelectenerg-900	129	8	ensure	ensure	VERB
fuelectenerg-900	129	9	that	that	SCONJ
fuelectenerg-900	129	10	resonators	resonator	NOUN
fuelectenerg-900	129	11	operate	operate	VERB
fuelectenerg-900	129	12	in	in	ADP
fuelectenerg-900	129	13	a	a	DET
fuelectenerg-900	129	14	vacuum	vacuum	NOUN
fuelectenerg-900	129	15	packaging	packaging	NOUN
fuelectenerg-900	129	16	.	.	PUNCT
fuelectenerg-900	130	1	the	the	DET
fuelectenerg-900	130	2	value	value	NOUN
fuelectenerg-900	130	3	of	of	ADP
fuelectenerg-900	130	4	the	the	DET
fuelectenerg-900	130	5	pressure	pressure	NOUN
fuelectenerg-900	130	6	at	at	ADP
fuelectenerg-900	130	7	which	which	PRON
fuelectenerg-900	130	8	q	q	NOUN
fuelectenerg-900	130	9	begins	begin	VERB
fuelectenerg-900	130	10	to	to	PART
fuelectenerg-900	130	11	decrease	decrease	VERB
fuelectenerg-900	130	12	due	due	ADP
fuelectenerg-900	130	13	to	to	ADP
fuelectenerg-900	130	14	gas	gas	NOUN
fuelectenerg-900	130	15	damping	damp	VERB
fuelectenerg-900	130	16	with	with	ADP
fuelectenerg-900	130	17	further	further	ADJ
fuelectenerg-900	130	18	increase	increase	NOUN
fuelectenerg-900	130	19	in	in	ADP
fuelectenerg-900	130	20	pressure	pressure	NOUN
fuelectenerg-900	130	21	depends	depend	VERB
fuelectenerg-900	130	22	on	on	ADP
fuelectenerg-900	130	23	the	the	DET
fuelectenerg-900	130	24	resonance	resonance	NOUN
fuelectenerg-900	130	25	frequency	frequency	NOUN
fuelectenerg-900	130	26	and	and	CCONJ
fuelectenerg-900	130	27	dimensions	dimension	NOUN
fuelectenerg-900	130	28	of	of	ADP
fuelectenerg-900	130	29	the	the	DET
fuelectenerg-900	130	30	resonant	resonant	ADJ
fuelectenerg-900	130	31	structure	structure	NOUN
fuelectenerg-900	130	32	.	.	PUNCT
fuelectenerg-900	131	1	this	this	DET
fuelectenerg-900	131	2	pressure	pressure	NOUN
fuelectenerg-900	131	3	value	value	NOUN
fuelectenerg-900	131	4	is	be	AUX
fuelectenerg-900	131	5	lower	low	ADJ
fuelectenerg-900	131	6	in	in	ADP
fuelectenerg-900	131	7	resonators	resonator	NOUN
fuelectenerg-900	131	8	of	of	ADP
fuelectenerg-900	131	9	smaller	small	ADJ
fuelectenerg-900	131	10	dimensions	dimension	NOUN
fuelectenerg-900	131	11	(	(	PUNCT
fuelectenerg-900	131	12	at	at	ADP
fuelectenerg-900	131	13	the	the	DET
fuelectenerg-900	131	14	same	same	ADJ
fuelectenerg-900	131	15	f0	f0	PROPN
fuelectenerg-900	131	16	)	)	PUNCT
fuelectenerg-900	131	17	,	,	PUNCT
fuelectenerg-900	131	18	as	as	ADV
fuelectenerg-900	131	19	well	well	ADV
fuelectenerg-900	131	20	as	as	ADP
fuelectenerg-900	131	21	in	in	ADP
fuelectenerg-900	131	22	resonators	resonator	NOUN
fuelectenerg-900	131	23	of	of	ADP
fuelectenerg-900	131	24	lower	low	ADJ
fuelectenerg-900	131	25	f0	f0	PROPN
fuelectenerg-900	131	26	.	.	PUNCT
fuelectenerg-900	132	1	the	the	DET
fuelectenerg-900	132	2	energy	energy	NOUN
fuelectenerg-900	132	3	loss	loss	NOUN
fuelectenerg-900	132	4	due	due	ADP
fuelectenerg-900	132	5	to	to	ADP
fuelectenerg-900	132	6	other	other	ADJ
fuelectenerg-900	132	7	mechanisms	mechanism	NOUN
fuelectenerg-900	132	8	can	can	AUX
fuelectenerg-900	132	9	be	be	AUX
fuelectenerg-900	132	10	minimized	minimize	VERB
fuelectenerg-900	132	11	by	by	ADP
fuelectenerg-900	132	12	optimizing	optimize	VERB
fuelectenerg-900	132	13	the	the	DET
fuelectenerg-900	132	14	design	design	NOUN
fuelectenerg-900	132	15	of	of	ADP
fuelectenerg-900	132	16	the	the	DET
fuelectenerg-900	132	17	resonator	resonator	NOUN
fuelectenerg-900	132	18	(	(	PUNCT
fuelectenerg-900	132	19	choice	choice	NOUN
fuelectenerg-900	132	20	of	of	ADP
fuelectenerg-900	132	21	material	material	NOUN
fuelectenerg-900	132	22	,	,	PUNCT
fuelectenerg-900	132	23	shape	shape	NOUN
fuelectenerg-900	132	24	,	,	PUNCT
fuelectenerg-900	132	25	size	size	NOUN
fuelectenerg-900	132	26	and	and	CCONJ
fuelectenerg-900	132	27	place	place	NOUN
fuelectenerg-900	132	28	where	where	SCONJ
fuelectenerg-900	132	29	the	the	DET
fuelectenerg-900	132	30	resonant	resonant	ADJ
fuelectenerg-900	132	31	structure	structure	NOUN
fuelectenerg-900	132	32	is	be	AUX
fuelectenerg-900	132	33	fixed	fix	VERB
fuelectenerg-900	132	34	,	,	PUNCT
fuelectenerg-900	132	35	choice	choice	NOUN
fuelectenerg-900	132	36	of	of	ADP
fuelectenerg-900	132	37	mode	mode	NOUN
fuelectenerg-900	132	38	of	of	ADP
fuelectenerg-900	132	39	oscillation	oscillation	NOUN
fuelectenerg-900	132	40	,	,	PUNCT
fuelectenerg-900	132	41	etc	etc	X
fuelectenerg-900	132	42	.	.	X
fuelectenerg-900	132	43	)	)	PUNCT
fuelectenerg-900	132	44	.	.	PUNCT
fuelectenerg-900	133	1	for	for	ADP
fuelectenerg-900	133	2	example	example	NOUN
fuelectenerg-900	133	3	,	,	PUNCT
fuelectenerg-900	133	4	q	q	NOUN
fuelectenerg-900	133	5	increases	increase	VERB
fuelectenerg-900	133	6	with	with	ADP
fuelectenerg-900	133	7	a	a	DET
fuelectenerg-900	133	8	decreased	decrease	VERB
fuelectenerg-900	133	9	resonator	resonator	NOUN
fuelectenerg-900	133	10	surface	surface	NOUN
fuelectenerg-900	133	11	-	-	PUNCT
fuelectenerg-900	133	12	tovolume	tovolume	NOUN
fuelectenerg-900	133	13	ratio	ratio	NOUN
fuelectenerg-900	133	14	.	.	PUNCT
fuelectenerg-900	134	1	bulk	bulk	ADJ
fuelectenerg-900	134	2	mode	mode	NOUN
fuelectenerg-900	134	3	resonators	resonator	NOUN
fuelectenerg-900	134	4	have	have	VERB
fuelectenerg-900	134	5	a	a	DET
fuelectenerg-900	134	6	greater	great	ADJ
fuelectenerg-900	134	7	q	q	NOUN
fuelectenerg-900	134	8	than	than	ADP
fuelectenerg-900	134	9	flexural	flexural	ADJ
fuelectenerg-900	134	10	,	,	PUNCT
fuelectenerg-900	134	11	whereas	whereas	SCONJ
fuelectenerg-900	134	12	si	si	PROPN
fuelectenerg-900	134	13	bulk	bulk	ADJ
fuelectenerg-900	134	14	resonators	resonator	NOUN
fuelectenerg-900	134	15	have	have	VERB
fuelectenerg-900	134	16	greater	great	ADJ
fuelectenerg-900	134	17	q	q	NOUN
fuelectenerg-900	134	18	than	than	ADP
fuelectenerg-900	134	19	aln	aln	PROPN
fuelectenerg-900	134	20	bulk	bulk	ADJ
fuelectenerg-900	134	21	resonators	resonator	NOUN
fuelectenerg-900	134	22	.	.	PUNCT
fuelectenerg-900	135	1	thermoelastic	thermoelastic	ADJ
fuelectenerg-900	135	2	losses	loss	NOUN
fuelectenerg-900	135	3	set	set	VERB
fuelectenerg-900	135	4	the	the	DET
fuelectenerg-900	135	5	upper	upper	ADJ
fuelectenerg-900	135	6	fundamental	fundamental	ADJ
fuelectenerg-900	135	7	thermodynamic	thermodynamic	ADJ
fuelectenerg-900	135	8	limit	limit	NOUN
fuelectenerg-900	135	9	of	of	ADP
fuelectenerg-900	135	10	the	the	DET
fuelectenerg-900	135	11	resonator	resonator	NOUN
fuelectenerg-900	135	12	quality	quality	NOUN
fuelectenerg-900	135	13	factor	factor	NOUN
fuelectenerg-900	135	14	,	,	PUNCT
fuelectenerg-900	135	15	and	and	CCONJ
fuelectenerg-900	135	16	also	also	ADV
fuelectenerg-900	135	17	of	of	ADP
fuelectenerg-900	135	18	the	the	DET
fuelectenerg-900	135	19	f0q	f0q	PROPN
fuelectenerg-900	135	20	product	product	NOUN
fuelectenerg-900	135	21	in	in	ADP
fuelectenerg-900	135	22	resonators	resonator	NOUN
fuelectenerg-900	135	23	whose	whose	DET
fuelectenerg-900	135	24	resonant	resonant	ADJ
fuelectenerg-900	135	25	frequency	frequency	NOUN
fuelectenerg-900	135	26	is	be	AUX
fuelectenerg-900	135	27	lower	low	ADJ
fuelectenerg-900	135	28	than	than	ADP
fuelectenerg-900	135	29	1	1	NUM
fuelectenerg-900	135	30	ghz	ghz	NOUN
fuelectenerg-900	135	31	[	[	X
fuelectenerg-900	135	32	7	7	NUM
fuelectenerg-900	135	33	]	]	PUNCT
fuelectenerg-900	135	34	.	.	PUNCT
fuelectenerg-900	136	1	the	the	DET
fuelectenerg-900	136	2	value	value	NOUN
fuelectenerg-900	136	3	of	of	ADP
fuelectenerg-900	136	4	q	q	NOUN
fuelectenerg-900	136	5	increases	increase	NOUN
fuelectenerg-900	136	6	with	with	ADP
fuelectenerg-900	136	7	decreasing	decrease	VERB
fuelectenerg-900	136	8	temperature	temperature	NOUN
fuelectenerg-900	136	9	.	.	PUNCT
fuelectenerg-900	137	1	the	the	DET
fuelectenerg-900	137	2	resonance	resonance	NOUN
fuelectenerg-900	137	3	frequency	frequency	NOUN
fuelectenerg-900	137	4	of	of	ADP
fuelectenerg-900	137	5	fbar	fbar	NOUN
fuelectenerg-900	137	6	resonators	resonator	NOUN
fuelectenerg-900	137	7	is	be	AUX
fuelectenerg-900	137	8	typically	typically	ADV
fuelectenerg-900	137	9	in	in	ADP
fuelectenerg-900	137	10	the	the	DET
fuelectenerg-900	137	11	range	range	NOUN
fuelectenerg-900	137	12	between	between	ADP
fuelectenerg-900	137	13	400	400	NUM
fuelectenerg-900	137	14	mhz	mhz	ADJ
fuelectenerg-900	137	15	and	and	CCONJ
fuelectenerg-900	137	16	10	10	NUM
fuelectenerg-900	137	17	ghz	ghz	NOUN
fuelectenerg-900	137	18	,	,	PUNCT
fuelectenerg-900	137	19	and	and	CCONJ
fuelectenerg-900	137	20	their	their	PRON
fuelectenerg-900	137	21	q	q	ADJ
fuelectenerg-900	137	22	factor	factor	NOUN
fuelectenerg-900	137	23	is	be	AUX
fuelectenerg-900	137	24	usually	usually	ADV
fuelectenerg-900	137	25	1000	1000	NUM
fuelectenerg-900	137	26	-	-	SYM
fuelectenerg-900	137	27	3000	3000	NUM
fuelectenerg-900	137	28	.	.	PUNCT
fuelectenerg-900	138	1	the	the	DET
fuelectenerg-900	138	2	relatively	relatively	ADV
fuelectenerg-900	138	3	low	low	ADJ
fuelectenerg-900	138	4	values	value	NOUN
fuelectenerg-900	138	5	of	of	ADP
fuelectenerg-900	138	6	the	the	DET
fuelectenerg-900	138	7	q	q	PROPN
fuelectenerg-900	138	8	of	of	ADP
fuelectenerg-900	138	9	aln	aln	PROPN
fuelectenerg-900	138	10	-	-	PUNCT
fuelectenerg-900	138	11	based	base	VERB
fuelectenerg-900	138	12	resonators	resonator	NOUN
fuelectenerg-900	138	13	are	be	AUX
fuelectenerg-900	138	14	a	a	DET
fuelectenerg-900	138	15	consequence	consequence	NOUN
fuelectenerg-900	138	16	of	of	ADP
fuelectenerg-900	138	17	material	material	NOUN
fuelectenerg-900	138	18	losses	loss	NOUN
fuelectenerg-900	138	19	,	,	PUNCT
fuelectenerg-900	138	20	which	which	PRON
fuelectenerg-900	138	21	are	be	AUX
fuelectenerg-900	138	22	specifically	specifically	ADV
fuelectenerg-900	138	23	related	relate	VERB
fuelectenerg-900	138	24	to	to	ADP
fuelectenerg-900	138	25	metal	metal	NOUN
fuelectenerg-900	138	26	electrodes	electrode	NOUN
fuelectenerg-900	138	27	that	that	PRON
fuelectenerg-900	138	28	are	be	AUX
fuelectenerg-900	138	29	placed	place	VERB
fuelectenerg-900	138	30	directly	directly	ADV
fuelectenerg-900	138	31	on	on	ADP
fuelectenerg-900	138	32	the	the	DET
fuelectenerg-900	138	33	pe	pe	PROPN
fuelectenerg-900	138	34	material	material	NOUN
fuelectenerg-900	138	35	.	.	PUNCT
fuelectenerg-900	139	1	as	as	ADV
fuelectenerg-900	139	2	far	far	ADV
fuelectenerg-900	139	3	as	as	SCONJ
fuelectenerg-900	139	4	the	the	DET
fuelectenerg-900	139	5	value	value	NOUN
fuelectenerg-900	139	6	of	of	ADP
fuelectenerg-900	139	7	the	the	DET
fuelectenerg-900	139	8	product	product	NOUN
fuelectenerg-900	139	9	f0q	f0q	PROPN
fuelectenerg-900	139	10	(	(	PUNCT
fuelectenerg-900	139	11	on	on	ADP
fuelectenerg-900	139	12	the	the	DET
fuelectenerg-900	139	13	scale	scale	NOUN
fuelectenerg-900	139	14	of	of	ADP
fuelectenerg-900	139	15	10	10	NUM
fuelectenerg-900	139	16	12	12	NUM
fuelectenerg-900	139	17	)	)	PUNCT
fuelectenerg-900	139	18	is	be	AUX
fuelectenerg-900	139	19	concerned	concern	VERB
fuelectenerg-900	139	20	,	,	PUNCT
fuelectenerg-900	139	21	lbars	lbar	NOUN
fuelectenerg-900	139	22	in	in	ADP
fuelectenerg-900	139	23	the	the	DET
fuelectenerg-900	139	24	form	form	NOUN
fuelectenerg-900	139	25	of	of	ADP
fuelectenerg-900	139	26	an	an	DET
fuelectenerg-900	139	27	aln	aln	PROPN
fuelectenerg-900	139	28	ring	ring	NOUN
fuelectenerg-900	139	29	with	with	ADP
fuelectenerg-900	139	30	a	a	DET
fuelectenerg-900	139	31	lateral	lateral	ADJ
fuelectenerg-900	139	32	contour	contour	NOUN
fuelectenerg-900	139	33	mode	mode	NOUN
fuelectenerg-900	139	34	and	and	CCONJ
fuelectenerg-900	139	35	lfe	lfe	PROPN
fuelectenerg-900	139	36	(	(	PUNCT
fuelectenerg-900	139	37	saw	saw	NOUN
fuelectenerg-900	139	38	-	-	PUNCT
fuelectenerg-900	139	39	baw	baw	NOUN
fuelectenerg-900	139	40	)	)	PUNCT
fuelectenerg-900	139	41	resonators	resonator	NOUN
fuelectenerg-900	139	42	[	[	X
fuelectenerg-900	139	43	8	8	NUM
fuelectenerg-900	139	44	-	-	SYM
fuelectenerg-900	139	45	10	10	NUM
fuelectenerg-900	139	46	]	]	PUNCT
fuelectenerg-900	139	47	have	have	VERB
fuelectenerg-900	139	48	a	a	DET
fuelectenerg-900	139	49	prominent	prominent	ADJ
fuelectenerg-900	139	50	place	place	NOUN
fuelectenerg-900	139	51	among	among	ADP
fuelectenerg-900	139	52	pe	pe	PROPN
fuelectenerg-900	139	53	resonators	resonator	NOUN
fuelectenerg-900	139	54	.	.	PUNCT
fuelectenerg-900	140	1	for	for	ADP
fuelectenerg-900	140	2	example	example	NOUN
fuelectenerg-900	140	3	,	,	PUNCT
fuelectenerg-900	140	4	the	the	DET
fuelectenerg-900	140	5	q	q	NOUN
fuelectenerg-900	140	6	factor	factor	NOUN
fuelectenerg-900	140	7	of	of	ADP
fuelectenerg-900	140	8	saw	saw	NOUN
fuelectenerg-900	140	9	-	-	PUNCT
fuelectenerg-900	140	10	baw	baw	NOUN
fuelectenerg-900	140	11	mems	mem	NOUN
fuelectenerg-900	140	12	resonators	resonator	NOUN
fuelectenerg-900	140	13	with	with	ADP
fuelectenerg-900	140	14	the	the	DET
fuelectenerg-900	140	15	resonance	resonance	NOUN
fuelectenerg-900	140	16	frequency	frequency	NOUN
fuelectenerg-900	140	17	of	of	ADP
fuelectenerg-900	140	18	843	843	NUM
fuelectenerg-900	140	19	mhz	mhz	ADJ
fuelectenerg-900	140	20	–	–	PUNCT
fuelectenerg-900	140	21	1.64	1.64	NUM
fuelectenerg-900	140	22	ghz	ghz	NOUN
fuelectenerg-900	140	23	,	,	PUNCT
fuelectenerg-900	140	24	manufactured	manufacture	VERB
fuelectenerg-900	140	25	using	use	VERB
fuelectenerg-900	140	26	the	the	DET
fuelectenerg-900	140	27	cmos	cmos	ADJ
fuelectenerg-900	140	28	-	-	PUNCT
fuelectenerg-900	140	29	compatible	compatible	ADJ
fuelectenerg-900	140	30	process	process	NOUN
fuelectenerg-900	140	31	,	,	PUNCT
fuelectenerg-900	140	32	is	be	AUX
fuelectenerg-900	140	33	up	up	ADP
fuelectenerg-900	140	34	to	to	ADP
fuelectenerg-900	140	35	2200	2200	NUM
fuelectenerg-900	140	36	in	in	ADP
fuelectenerg-900	140	37	air	air	NOUN
fuelectenerg-900	141	1	[	[	X
fuelectenerg-900	141	2	8	8	NUM
fuelectenerg-900	141	3	]	]	PUNCT
fuelectenerg-900	141	4	.	.	PUNCT
fuelectenerg-900	142	1	the	the	DET
fuelectenerg-900	142	2	second	second	ADJ
fuelectenerg-900	142	3	lateral	lateral	ADJ
fuelectenerg-900	142	4	resonator	resonator	NOUN
fuelectenerg-900	142	5	[	[	X
fuelectenerg-900	142	6	11	11	NUM
fuelectenerg-900	142	7	]	]	PUNCT
fuelectenerg-900	142	8	,	,	PUNCT
fuelectenerg-900	142	9	monolithically	monolithically	ADV
fuelectenerg-900	142	10	integrated	integrate	VERB
fuelectenerg-900	142	11	with	with	ADP
fuelectenerg-900	142	12	cmos	cmos	ADJ
fuelectenerg-900	142	13	circuits	circuit	NOUN
fuelectenerg-900	142	14	,	,	PUNCT
fuelectenerg-900	142	15	has	have	AUX
fuelectenerg-900	142	16	f0=1.01	f0=1.01	VERB
fuelectenerg-900	142	17	ghz	ghz	NOUN
fuelectenerg-900	142	18	,	,	PUNCT
fuelectenerg-900	142	19	and	and	CCONJ
fuelectenerg-900	142	20	q	q	X
fuelectenerg-900	142	21	around	around	ADP
fuelectenerg-900	142	22	7000	7000	NUM
fuelectenerg-900	142	23	in	in	ADP
fuelectenerg-900	142	24	air	air	NOUN
fuelectenerg-900	142	25	.	.	PUNCT
fuelectenerg-900	143	1	capacitive	capacitive	ADJ
fuelectenerg-900	143	2	transduction	transduction	NOUN
fuelectenerg-900	143	3	influences	influence	VERB
fuelectenerg-900	143	4	the	the	DET
fuelectenerg-900	143	5	mechanical	mechanical	ADJ
fuelectenerg-900	143	6	resonance	resonance	NOUN
fuelectenerg-900	143	7	frequency	frequency	NOUN
fuelectenerg-900	143	8	of	of	ADP
fuelectenerg-900	143	9	a	a	DET
fuelectenerg-900	143	10	resonator	resonator	NOUN
fuelectenerg-900	143	11	through	through	ADP
fuelectenerg-900	143	12	the	the	DET
fuelectenerg-900	143	13	effect	effect	NOUN
fuelectenerg-900	143	14	of	of	ADP
fuelectenerg-900	143	15	spring	spring	NOUN
fuelectenerg-900	143	16	constant	constant	ADJ
fuelectenerg-900	143	17	softening	softening	NOUN
fuelectenerg-900	143	18	[	[	X
fuelectenerg-900	143	19	12	12	NUM
fuelectenerg-900	143	20	-	-	SYM
fuelectenerg-900	143	21	14	14	NUM
fuelectenerg-900	143	22	]	]	PUNCT
fuelectenerg-900	143	23	.	.	PUNCT
fuelectenerg-900	144	1	namely	namely	ADV
fuelectenerg-900	144	2	,	,	PUNCT
fuelectenerg-900	144	3	in	in	ADP
fuelectenerg-900	144	4	capacitive	capacitive	ADJ
fuelectenerg-900	144	5	mems	mem	NOUN
fuelectenerg-900	144	6	resonators	resonator	NOUN
fuelectenerg-900	144	7	,	,	PUNCT
fuelectenerg-900	144	8	along	along	ADP
fuelectenerg-900	144	9	with	with	ADP
fuelectenerg-900	144	10	the	the	DET
fuelectenerg-900	144	11	mechanical	mechanical	ADJ
fuelectenerg-900	144	12	component	component	NOUN
fuelectenerg-900	144	13	,	,	PUNCT
fuelectenerg-900	144	14	the	the	DET
fuelectenerg-900	144	15	effective	effective	ADJ
fuelectenerg-900	144	16	stiffness	stiffness	NOUN
fuelectenerg-900	144	17	has	have	VERB
fuelectenerg-900	144	18	an	an	DET
fuelectenerg-900	144	19	electrical	electrical	ADJ
fuelectenerg-900	144	20	component	component	NOUN
fuelectenerg-900	144	21	(	(	PUNCT
fuelectenerg-900	144	22	which	which	PRON
fuelectenerg-900	144	23	depends	depend	VERB
fuelectenerg-900	144	24	on	on	ADP
fuelectenerg-900	144	25	the	the	DET
fuelectenerg-900	144	26	dc	dc	PROPN
fuelectenerg-900	144	27	-	-	PUNCT
fuelectenerg-900	144	28	bias	bias	NOUN
fuelectenerg-900	144	29	voltage	voltage	NOUN
fuelectenerg-900	144	30	,	,	PUNCT
fuelectenerg-900	144	31	resonator	resonator	NOUN
fuelectenerg-900	144	32	-	-	PUNCT
fuelectenerg-900	144	33	to	to	ADP
fuelectenerg-900	144	34	-	-	PUNCT
fuelectenerg-900	144	35	electrode	electrode	NOUN
fuelectenerg-900	144	36	gap	gap	NOUN
fuelectenerg-900	144	37	spacing	spacing	NOUN
fuelectenerg-900	144	38	,	,	PUNCT
fuelectenerg-900	144	39	g	g	PROPN
fuelectenerg-900	144	40	,	,	PUNCT
fuelectenerg-900	144	41	the	the	DET
fuelectenerg-900	144	42	electrode	electrode	NOUN
fuelectenerg-900	144	43	overlap	overlap	NOUN
fuelectenerg-900	144	44	area	area	NOUN
fuelectenerg-900	144	45	,	,	PUNCT
fuelectenerg-900	144	46	ae	ae	PROPN
fuelectenerg-900	144	47	,	,	PUNCT
fuelectenerg-900	144	48	and	and	CCONJ
fuelectenerg-900	144	49	the	the	DET
fuelectenerg-900	144	50	permittivity	permittivity	NOUN
fuelectenerg-900	144	51	of	of	ADP
fuelectenerg-900	144	52	the	the	DET
fuelectenerg-900	144	53	dielectric	dielectric	NOUN
fuelectenerg-900	144	54	which	which	PRON
fuelectenerg-900	144	55	fills	fill	VERB
fuelectenerg-900	144	56	the	the	DET
fuelectenerg-900	144	57	gap	gap	NOUN
fuelectenerg-900	144	58	,	,	PUNCT
fuelectenerg-900	144	59	εd	εd	NOUN
fuelectenerg-900	144	60	)	)	PUNCT
fuelectenerg-900	144	61	.	.	PUNCT
fuelectenerg-900	145	1	that	that	PRON
fuelectenerg-900	145	2	is	be	AUX
fuelectenerg-900	145	3	why	why	SCONJ
fuelectenerg-900	145	4	the	the	DET
fuelectenerg-900	145	5	overall	overall	ADJ
fuelectenerg-900	145	6	resonance	resonance	NOUN
fuelectenerg-900	145	7	frequency	frequency	NOUN
fuelectenerg-900	145	8	is	be	AUX
fuelectenerg-900	145	9	different	different	ADJ
fuelectenerg-900	145	10	from	from	ADP
fuelectenerg-900	145	11	the	the	DET
fuelectenerg-900	145	12	mechanical	mechanical	ADJ
fuelectenerg-900	145	13	resonance	resonance	NOUN
fuelectenerg-900	145	14	frequency	frequency	NOUN
fuelectenerg-900	145	15	and	and	CCONJ
fuelectenerg-900	145	16	is	be	AUX
fuelectenerg-900	145	17	determined	determine	VERB
fuelectenerg-900	145	18	not	not	PART
fuelectenerg-900	145	19	only	only	ADV
fuelectenerg-900	145	20	by	by	ADP
fuelectenerg-900	145	21	the	the	DET
fuelectenerg-900	145	22	dimensions	dimension	NOUN
fuelectenerg-900	145	23	and	and	CCONJ
fuelectenerg-900	145	24	the	the	DET
fuelectenerg-900	145	25	material	material	NOUN
fuelectenerg-900	145	26	parameters	parameter	NOUN
fuelectenerg-900	145	27	of	of	ADP
fuelectenerg-900	145	28	the	the	DET
fuelectenerg-900	145	29	resonant	resonant	ADJ
fuelectenerg-900	145	30	structure	structure	NOUN
fuelectenerg-900	145	31	,	,	PUNCT
fuelectenerg-900	145	32	but	but	CCONJ
fuelectenerg-900	145	33	also	also	ADV
fuelectenerg-900	145	34	by	by	ADP
fuelectenerg-900	145	35	the	the	DET
fuelectenerg-900	145	36	parameters	parameter	NOUN
fuelectenerg-900	145	37	vp	vp	PROPN
fuelectenerg-900	145	38	,	,	PUNCT
fuelectenerg-900	145	39	g	g	PROPN
fuelectenerg-900	145	40	,	,	PUNCT
fuelectenerg-900	145	41	ae	ae	PROPN
fuelectenerg-900	145	42	and	and	CCONJ
fuelectenerg-900	145	43	εd	εd	PROPN
fuelectenerg-900	145	44	.	.	PROPN
fuelectenerg-900	145	45	capacitive	capacitive	ADJ
fuelectenerg-900	145	46	mems	mem	NOUN
fuelectenerg-900	145	47	resonators	resonator	NOUN
fuelectenerg-900	145	48	generally	generally	ADV
fuelectenerg-900	145	49	have	have	VERB
fuelectenerg-900	145	50	higher	high	ADJ
fuelectenerg-900	145	51	q	q	NOUN
fuelectenerg-900	145	52	than	than	ADP
fuelectenerg-900	145	53	piezoelectric	piezoelectric	ADJ
fuelectenerg-900	145	54	ones	one	NOUN
fuelectenerg-900	145	55	(	(	PUNCT
fuelectenerg-900	145	56	because	because	SCONJ
fuelectenerg-900	145	57	in	in	ADP
fuelectenerg-900	145	58	piezoelectric	piezoelectric	ADJ
fuelectenerg-900	145	59	resonators	resonator	NOUN
fuelectenerg-900	145	60	lossy	lossy	ADJ
fuelectenerg-900	145	61	metallic	metallic	ADJ
fuelectenerg-900	145	62	electrodes	electrode	NOUN
fuelectenerg-900	145	63	are	be	AUX
fuelectenerg-900	145	64	deposited	deposit	VERB
fuelectenerg-900	145	65	on	on	ADP
fuelectenerg-900	145	66	top	top	NOUN
fuelectenerg-900	145	67	of	of	ADP
fuelectenerg-900	145	68	the	the	DET
fuelectenerg-900	145	69	resonant	resonant	ADJ
fuelectenerg-900	145	70	structure	structure	NOUN
fuelectenerg-900	145	71	)	)	PUNCT
fuelectenerg-900	145	72	.	.	PUNCT
fuelectenerg-900	146	1	the	the	DET
fuelectenerg-900	146	2	q	q	NOUN
fuelectenerg-900	146	3	factor	factor	NOUN
fuelectenerg-900	146	4	of	of	ADP
fuelectenerg-900	146	5	capacitive	capacitive	ADJ
fuelectenerg-900	146	6	resonators	resonator	NOUN
fuelectenerg-900	146	7	that	that	PRON
fuelectenerg-900	146	8	oscillate	oscillate	VERB
fuelectenerg-900	146	9	in	in	ADP
fuelectenerg-900	146	10	bulk	bulk	ADJ
fuelectenerg-900	146	11	modes	mode	NOUN
fuelectenerg-900	146	12	is	be	AUX
fuelectenerg-900	146	13	greater	great	ADJ
fuelectenerg-900	146	14	than	than	ADP
fuelectenerg-900	146	15	that	that	PRON
fuelectenerg-900	146	16	in	in	ADP
fuelectenerg-900	146	17	flexural	flexural	ADJ
fuelectenerg-900	146	18	resonators	resonator	NOUN
fuelectenerg-900	146	19	of	of	ADP
fuelectenerg-900	146	20	the	the	DET
fuelectenerg-900	146	21	same	same	ADJ
fuelectenerg-900	146	22	resonance	resonance	NOUN
fuelectenerg-900	146	23	frequency	frequency	NOUN
fuelectenerg-900	146	24	due	due	ADP
fuelectenerg-900	146	25	to	to	ADP
fuelectenerg-900	146	26	lower	low	ADJ
fuelectenerg-900	146	27	energy	energy	NOUN
fuelectenerg-900	146	28	loss	loss	NOUN
fuelectenerg-900	146	29	(	(	PUNCT
fuelectenerg-900	146	30	clamping	clamp	VERB
fuelectenerg-900	146	31	loss	loss	NOUN
fuelectenerg-900	146	32	,	,	PUNCT
fuelectenerg-900	146	33	dissipation	dissipation	NOUN
fuelectenerg-900	146	34	due	due	ADP
fuelectenerg-900	146	35	to	to	ADP
fuelectenerg-900	146	36	the	the	DET
fuelectenerg-900	146	37	surrounding	surround	VERB
fuelectenerg-900	146	38	medium	medium	NOUN
fuelectenerg-900	146	39	,	,	PUNCT
fuelectenerg-900	146	40	due	due	ADP
fuelectenerg-900	146	41	to	to	ADP
fuelectenerg-900	146	42	surface	surface	NOUN
fuelectenerg-900	146	43	defects	defect	NOUN
fuelectenerg-900	146	44	,	,	PUNCT
fuelectenerg-900	146	45	thermoelastic	thermoelastic	ADJ
fuelectenerg-900	146	46	effect	effect	NOUN
fuelectenerg-900	146	47	)	)	PUNCT
fuelectenerg-900	147	1	[	[	X
fuelectenerg-900	147	2	15	15	NUM
fuelectenerg-900	147	3	,	,	PUNCT
fuelectenerg-900	147	4	16	16	NUM
fuelectenerg-900	147	5	]	]	PUNCT
fuelectenerg-900	147	6	.	.	PUNCT
fuelectenerg-900	148	1	the	the	DET
fuelectenerg-900	148	2	q	q	NOUN
fuelectenerg-900	148	3	factor	factor	NOUN
fuelectenerg-900	148	4	of	of	ADP
fuelectenerg-900	148	5	capacitive	capacitive	ADJ
fuelectenerg-900	148	6	bulk	bulk	ADJ
fuelectenerg-900	148	7	mode	mode	NOUN
fuelectenerg-900	148	8	resonators	resonator	NOUN
fuelectenerg-900	148	9	remains	remain	VERB
fuelectenerg-900	148	10	at	at	ADP
fuelectenerg-900	148	11	its	its	PRON
fuelectenerg-900	148	12	maximum	maximum	NOUN
fuelectenerg-900	148	13	at	at	ADP
fuelectenerg-900	148	14	higher	high	ADJ
fuelectenerg-900	148	15	values	value	NOUN
fuelectenerg-900	148	16	of	of	ADP
fuelectenerg-900	148	17	pressure	pressure	NOUN
fuelectenerg-900	148	18	(	(	PUNCT
fuelectenerg-900	148	19	i.e.	i.e.	X
fuelectenerg-900	148	20	q>10	q>10	NUM
fuelectenerg-900	148	21	5	5	NUM
fuelectenerg-900	148	22	at	at	ADP
fuelectenerg-900	148	23	pressures	pressure	NOUN
fuelectenerg-900	148	24	of	of	ADP
fuelectenerg-900	148	25	~10	~10	PRON
fuelectenerg-900	148	26	4	4	NUM
fuelectenerg-900	148	27	pa	pa	PROPN
fuelectenerg-900	148	28	[	[	X
fuelectenerg-900	148	29	17	17	NUM
fuelectenerg-900	148	30	]	]	PUNCT
fuelectenerg-900	148	31	)	)	PUNCT
fuelectenerg-900	148	32	in	in	ADP
fuelectenerg-900	148	33	comparison	comparison	NOUN
fuelectenerg-900	148	34	to	to	ADP
fuelectenerg-900	148	35	rf	rf	NOUN
fuelectenerg-900	148	36	mems	mem	NOUN
fuelectenerg-900	148	37	/	/	SYM
fuelectenerg-900	148	38	nems	nem	NOUN
fuelectenerg-900	148	39	resonators	resonator	NOUN
fuelectenerg-900	148	40	for	for	ADP
fuelectenerg-900	148	41	wireless	wireless	ADJ
fuelectenerg-900	148	42	communication	communication	NOUN
fuelectenerg-900	148	43	systems	system	NOUN
fuelectenerg-900	148	44	and	and	CCONJ
fuelectenerg-900	148	45	adsorption	adsorption	NOUN
fuelectenerg-900	148	46	-	-	PUNCT
fuelectenerg-900	148	47	desorption	desorption	NOUN
fuelectenerg-900	148	48	phase	phase	NOUN
fuelectenerg-900	148	49	noise	noise	NOUN
fuelectenerg-900	148	50	353	353	NUM
fuelectenerg-900	148	51	flexural	flexural	ADJ
fuelectenerg-900	148	52	ones	one	NOUN
fuelectenerg-900	148	53	,	,	PUNCT
fuelectenerg-900	148	54	thus	thus	ADV
fuelectenerg-900	148	55	vacuum	vacuum	NOUN
fuelectenerg-900	148	56	-	-	PUNCT
fuelectenerg-900	148	57	packaging	packaging	NOUN
fuelectenerg-900	148	58	of	of	ADP
fuelectenerg-900	148	59	certain	certain	ADJ
fuelectenerg-900	148	60	types	type	NOUN
fuelectenerg-900	148	61	of	of	ADP
fuelectenerg-900	148	62	resonators	resonator	NOUN
fuelectenerg-900	148	63	oscillating	oscillate	VERB
fuelectenerg-900	148	64	in	in	ADP
fuelectenerg-900	148	65	bulk	bulk	ADJ
fuelectenerg-900	148	66	modes	mode	NOUN
fuelectenerg-900	148	67	is	be	AUX
fuelectenerg-900	148	68	not	not	PART
fuelectenerg-900	148	69	necessary	necessary	ADJ
fuelectenerg-900	148	70	in	in	SCONJ
fuelectenerg-900	148	71	order	order	NOUN
fuelectenerg-900	148	72	to	to	PART
fuelectenerg-900	148	73	achieve	achieve	VERB
fuelectenerg-900	148	74	a	a	DET
fuelectenerg-900	148	75	greater	great	ADJ
fuelectenerg-900	148	76	q.	q.	NOUN
fuelectenerg-900	148	77	however	however	ADV
fuelectenerg-900	148	78	,	,	PUNCT
fuelectenerg-900	148	79	there	there	PRON
fuelectenerg-900	148	80	are	be	VERB
fuelectenerg-900	148	81	other	other	ADJ
fuelectenerg-900	148	82	effects	effect	NOUN
fuelectenerg-900	148	83	of	of	ADP
fuelectenerg-900	148	84	gas	gas	NOUN
fuelectenerg-900	148	85	presence	presence	NOUN
fuelectenerg-900	148	86	in	in	ADP
fuelectenerg-900	148	87	the	the	DET
fuelectenerg-900	148	88	environment	environment	NOUN
fuelectenerg-900	148	89	(	(	PUNCT
fuelectenerg-900	148	90	e.g.	e.g.	ADV
fuelectenerg-900	148	91	resonance	resonance	NOUN
fuelectenerg-900	148	92	frequency	frequency	NOUN
fuelectenerg-900	148	93	drift	drift	NOUN
fuelectenerg-900	148	94	and	and	CCONJ
fuelectenerg-900	148	95	fluctuations	fluctuation	NOUN
fuelectenerg-900	148	96	)	)	PUNCT
fuelectenerg-900	148	97	that	that	PRON
fuelectenerg-900	148	98	influence	influence	VERB
fuelectenerg-900	148	99	the	the	DET
fuelectenerg-900	148	100	choice	choice	NOUN
fuelectenerg-900	148	101	of	of	ADP
fuelectenerg-900	148	102	operating	operating	NOUN
fuelectenerg-900	148	103	conditions	condition	NOUN
fuelectenerg-900	148	104	and	and	CCONJ
fuelectenerg-900	148	105	resonator	resonator	NOUN
fuelectenerg-900	148	106	packaging	packaging	NOUN
fuelectenerg-900	148	107	.	.	PUNCT
fuelectenerg-900	149	1	fig	fig	NOUN
fuelectenerg-900	149	2	.	.	PUNCT
fuelectenerg-900	150	1	3	3	NUM
fuelectenerg-900	150	2	shows	show	VERB
fuelectenerg-900	150	3	the	the	DET
fuelectenerg-900	150	4	values	value	NOUN
fuelectenerg-900	150	5	of	of	ADP
fuelectenerg-900	150	6	f0q	f0q	PROPN
fuelectenerg-900	150	7	reported	report	VERB
fuelectenerg-900	150	8	in	in	ADP
fuelectenerg-900	150	9	the	the	DET
fuelectenerg-900	150	10	literature	literature	NOUN
fuelectenerg-900	150	11	for	for	ADP
fuelectenerg-900	150	12	some	some	PRON
fuelectenerg-900	150	13	of	of	ADP
fuelectenerg-900	150	14	the	the	DET
fuelectenerg-900	150	15	realized	realize	VERB
fuelectenerg-900	150	16	capacitive	capacitive	ADJ
fuelectenerg-900	150	17	mems	mem	NOUN
fuelectenerg-900	150	18	resonators	resonator	NOUN
fuelectenerg-900	150	19	,	,	PUNCT
fuelectenerg-900	150	20	for	for	ADP
fuelectenerg-900	150	21	which	which	PRON
fuelectenerg-900	150	22	we	we	PRON
fuelectenerg-900	150	23	also	also	ADV
fuelectenerg-900	150	24	show	show	VERB
fuelectenerg-900	150	25	the	the	DET
fuelectenerg-900	150	26	values	value	NOUN
fuelectenerg-900	150	27	of	of	ADP
fuelectenerg-900	150	28	the	the	DET
fuelectenerg-900	150	29	resonance	resonance	NOUN
fuelectenerg-900	150	30	frequency	frequency	NOUN
fuelectenerg-900	150	31	and	and	CCONJ
fuelectenerg-900	150	32	the	the	DET
fuelectenerg-900	150	33	q	q	NOUN
fuelectenerg-900	150	34	factor	factor	NOUN
fuelectenerg-900	150	35	[	[	X
fuelectenerg-900	150	36	14	14	NUM
fuelectenerg-900	150	37	,	,	PUNCT
fuelectenerg-900	150	38	16	16	NUM
fuelectenerg-900	150	39	-	-	SYM
fuelectenerg-900	150	40	31	31	NUM
fuelectenerg-900	150	41	]	]	PUNCT
fuelectenerg-900	150	42	.	.	PUNCT
fuelectenerg-900	151	1	this	this	DET
fuelectenerg-900	151	2	diagram	diagram	NOUN
fuelectenerg-900	151	3	can	can	AUX
fuelectenerg-900	151	4	be	be	AUX
fuelectenerg-900	151	5	used	use	VERB
fuelectenerg-900	151	6	for	for	ADP
fuelectenerg-900	151	7	the	the	DET
fuelectenerg-900	151	8	comparison	comparison	NOUN
fuelectenerg-900	151	9	of	of	ADP
fuelectenerg-900	151	10	the	the	DET
fuelectenerg-900	151	11	performance	performance	NOUN
fuelectenerg-900	151	12	of	of	ADP
fuelectenerg-900	151	13	rf	rf	NOUN
fuelectenerg-900	151	14	mems	mem	NOUN
fuelectenerg-900	151	15	resonators	resonator	NOUN
fuelectenerg-900	151	16	and	and	CCONJ
fuelectenerg-900	151	17	quartz	quartz	NOUN
fuelectenerg-900	151	18	resonators	resonator	NOUN
fuelectenerg-900	151	19	.	.	PUNCT
fuelectenerg-900	152	1	it	it	PRON
fuelectenerg-900	152	2	can	can	AUX
fuelectenerg-900	152	3	be	be	AUX
fuelectenerg-900	152	4	observed	observe	VERB
fuelectenerg-900	152	5	that	that	SCONJ
fuelectenerg-900	152	6	f0q	f0q	PROPN
fuelectenerg-900	152	7	values	value	NOUN
fuelectenerg-900	152	8	corresponding	correspond	VERB
fuelectenerg-900	152	9	to	to	ADP
fuelectenerg-900	152	10	the	the	DET
fuelectenerg-900	152	11	best	good	ADJ
fuelectenerg-900	152	12	available	available	ADJ
fuelectenerg-900	152	13	quartz	quartz	NOUN
fuelectenerg-900	152	14	resonators	resonator	NOUN
fuelectenerg-900	152	15	are	be	AUX
fuelectenerg-900	152	16	already	already	ADV
fuelectenerg-900	152	17	reached	reach	VERB
fuelectenerg-900	152	18	by	by	ADP
fuelectenerg-900	152	19	mems	mem	NOUN
fuelectenerg-900	152	20	structures	structure	NOUN
fuelectenerg-900	152	21	.	.	PUNCT
fuelectenerg-900	153	1	also	also	ADV
fuelectenerg-900	153	2	,	,	PUNCT
fuelectenerg-900	153	3	mems	mem	NOUN
fuelectenerg-900	153	4	resonators	resonator	NOUN
fuelectenerg-900	153	5	go	go	VERB
fuelectenerg-900	153	6	far	far	ADV
fuelectenerg-900	153	7	beyond	beyond	ADP
fuelectenerg-900	153	8	conventional	conventional	ADJ
fuelectenerg-900	153	9	cmos	cmos	NOUN
fuelectenerg-900	153	10	(	(	PUNCT
fuelectenerg-900	153	11	lc	lc	NOUN
fuelectenerg-900	153	12	)	)	PUNCT
fuelectenerg-900	153	13	resonators	resonator	NOUN
fuelectenerg-900	153	14	in	in	ADP
fuelectenerg-900	153	15	terms	term	NOUN
fuelectenerg-900	153	16	of	of	ADP
fuelectenerg-900	153	17	the	the	DET
fuelectenerg-900	153	18	presented	present	VERB
fuelectenerg-900	153	19	parameters	parameter	NOUN
fuelectenerg-900	153	20	.	.	PUNCT
fuelectenerg-900	154	1	fig	fig	NOUN
fuelectenerg-900	154	2	.	.	PUNCT
fuelectenerg-900	155	1	3	3	NUM
fuelectenerg-900	155	2	values	value	NOUN
fuelectenerg-900	155	3	of	of	ADP
fuelectenerg-900	155	4	f0q	f0q	PROPN
fuelectenerg-900	155	5	reported	report	VERB
fuelectenerg-900	155	6	in	in	ADP
fuelectenerg-900	155	7	the	the	DET
fuelectenerg-900	155	8	literature	literature	NOUN
fuelectenerg-900	155	9	for	for	ADP
fuelectenerg-900	155	10	some	some	PRON
fuelectenerg-900	155	11	of	of	ADP
fuelectenerg-900	155	12	the	the	DET
fuelectenerg-900	155	13	realized	realize	VERB
fuelectenerg-900	155	14	capacitive	capacitive	ADJ
fuelectenerg-900	155	15	mems	mem	NOUN
fuelectenerg-900	155	16	resonators	resonator	NOUN
fuelectenerg-900	155	17	.	.	PUNCT
fuelectenerg-900	156	1	capacitive	capacitive	ADJ
fuelectenerg-900	156	2	resonators	resonator	NOUN
fuelectenerg-900	156	3	can	can	AUX
fuelectenerg-900	156	4	be	be	AUX
fuelectenerg-900	156	5	completely	completely	ADV
fuelectenerg-900	156	6	fabricated	fabricate	VERB
fuelectenerg-900	156	7	using	use	VERB
fuelectenerg-900	156	8	materials	material	NOUN
fuelectenerg-900	156	9	that	that	PRON
fuelectenerg-900	156	10	are	be	AUX
fuelectenerg-900	156	11	compatible	compatible	ADJ
fuelectenerg-900	156	12	with	with	ADP
fuelectenerg-900	156	13	silicon	silicon	PROPN
fuelectenerg-900	156	14	ic	ic	PROPN
fuelectenerg-900	156	15	technologies	technologies	PROPN
fuelectenerg-900	156	16	,	,	PUNCT
fuelectenerg-900	156	17	making	make	VERB
fuelectenerg-900	156	18	them	they	PRON
fuelectenerg-900	156	19	suitable	suitable	ADJ
fuelectenerg-900	156	20	for	for	ADP
fuelectenerg-900	156	21	monolithic	monolithic	ADJ
fuelectenerg-900	156	22	integration	integration	NOUN
fuelectenerg-900	156	23	with	with	ADP
fuelectenerg-900	156	24	transistor	transistor	NOUN
fuelectenerg-900	156	25	circuits	circuit	NOUN
fuelectenerg-900	156	26	.	.	PUNCT
fuelectenerg-900	157	1	although	although	SCONJ
fuelectenerg-900	157	2	the	the	DET
fuelectenerg-900	157	3	highest	high	ADJ
fuelectenerg-900	157	4	level	level	NOUN
fuelectenerg-900	157	5	of	of	ADP
fuelectenerg-900	157	6	integration	integration	NOUN
fuelectenerg-900	157	7	is	be	AUX
fuelectenerg-900	157	8	achieved	achieve	VERB
fuelectenerg-900	157	9	by	by	ADP
fuelectenerg-900	157	10	fabricating	fabricate	VERB
fuelectenerg-900	157	11	a	a	DET
fuelectenerg-900	157	12	resonator	resonator	NOUN
fuelectenerg-900	157	13	on	on	ADP
fuelectenerg-900	157	14	the	the	DET
fuelectenerg-900	157	15	same	same	ADJ
fuelectenerg-900	157	16	chip	chip	NOUN
fuelectenerg-900	157	17	with	with	ADP
fuelectenerg-900	157	18	cmos	cmos	ADJ
fuelectenerg-900	157	19	circuitry	circuitry	NOUN
fuelectenerg-900	157	20	[	[	X
fuelectenerg-900	157	21	32	32	NUM
fuelectenerg-900	157	22	]	]	PUNCT
fuelectenerg-900	157	23	,	,	PUNCT
fuelectenerg-900	157	24	which	which	PRON
fuelectenerg-900	157	25	means	mean	VERB
fuelectenerg-900	157	26	that	that	SCONJ
fuelectenerg-900	157	27	the	the	DET
fuelectenerg-900	157	28	fabrication	fabrication	NOUN
fuelectenerg-900	157	29	of	of	ADP
fuelectenerg-900	157	30	the	the	DET
fuelectenerg-900	157	31	resonator	resonator	NOUN
fuelectenerg-900	157	32	is	be	AUX
fuelectenerg-900	157	33	embedded	embed	VERB
fuelectenerg-900	157	34	in	in	ADP
fuelectenerg-900	157	35	an	an	DET
fuelectenerg-900	157	36	existing	exist	VERB
fuelectenerg-900	157	37	cmos	cmos	NOUN
fuelectenerg-900	157	38	flow	flow	NOUN
fuelectenerg-900	157	39	(	(	PUNCT
fuelectenerg-900	157	40	it	it	PRON
fuelectenerg-900	157	41	either	either	CCONJ
fuelectenerg-900	157	42	precedes	precede	VERB
fuelectenerg-900	157	43	cmos	cmos	ADJ
fuelectenerg-900	157	44	processing	processing	NOUN
fuelectenerg-900	157	45	steps	step	NOUN
fuelectenerg-900	157	46	or	or	CCONJ
fuelectenerg-900	157	47	is	be	AUX
fuelectenerg-900	157	48	performed	perform	VERB
fuelectenerg-900	157	49	between	between	ADP
fuelectenerg-900	157	50	them	they	PRON
fuelectenerg-900	157	51	)	)	PUNCT
fuelectenerg-900	157	52	,	,	PUNCT
fuelectenerg-900	157	53	it	it	PRON
fuelectenerg-900	157	54	almost	almost	ADV
fuelectenerg-900	157	55	always	always	ADV
fuelectenerg-900	157	56	implies	imply	VERB
fuelectenerg-900	157	57	degradation	degradation	NOUN
fuelectenerg-900	157	58	of	of	ADP
fuelectenerg-900	157	59	the	the	DET
fuelectenerg-900	157	60	performance	performance	NOUN
fuelectenerg-900	157	61	of	of	ADP
fuelectenerg-900	157	62	either	either	CCONJ
fuelectenerg-900	157	63	cmos	cmos	ADJ
fuelectenerg-900	157	64	circuits	circuit	NOUN
fuelectenerg-900	157	65	or	or	CCONJ
fuelectenerg-900	157	66	the	the	DET
fuelectenerg-900	157	67	resonator	resonator	NOUN
fuelectenerg-900	157	68	.	.	PUNCT
fuelectenerg-900	158	1	the	the	DET
fuelectenerg-900	158	2	most	most	ADV
fuelectenerg-900	158	3	convenient	convenient	ADJ
fuelectenerg-900	158	4	method	method	NOUN
fuelectenerg-900	158	5	of	of	ADP
fuelectenerg-900	158	6	monolithic	monolithic	ADJ
fuelectenerg-900	158	7	integration	integration	NOUN
fuelectenerg-900	158	8	is	be	AUX
fuelectenerg-900	158	9	the	the	DET
fuelectenerg-900	158	10	post	post	ADJ
fuelectenerg-900	158	11	-	-	ADJ
fuelectenerg-900	158	12	cmos	cmos	ADJ
fuelectenerg-900	158	13	integration	integration	NOUN
fuelectenerg-900	158	14	(	(	PUNCT
fuelectenerg-900	158	15	or	or	CCONJ
fuelectenerg-900	158	16	above	above	ADP
fuelectenerg-900	158	17	-	-	PUNCT
fuelectenerg-900	158	18	cmos	cmos	NOUN
fuelectenerg-900	158	19	)	)	PUNCT
fuelectenerg-900	158	20	,	,	PUNCT
fuelectenerg-900	158	21	in	in	ADP
fuelectenerg-900	158	22	which	which	PRON
fuelectenerg-900	158	23	the	the	DET
fuelectenerg-900	158	24	mems	mem	NOUN
fuelectenerg-900	158	25	processing	processing	NOUN
fuelectenerg-900	158	26	is	be	AUX
fuelectenerg-900	158	27	done	do	VERB
fuelectenerg-900	158	28	on	on	ADP
fuelectenerg-900	158	29	top	top	NOUN
fuelectenerg-900	158	30	of	of	ADP
fuelectenerg-900	158	31	prefabricated	prefabricate	VERB
fuelectenerg-900	158	32	cmos	cmos	ADJ
fuelectenerg-900	158	33	layers	layer	NOUN
fuelectenerg-900	158	34	.	.	PUNCT
fuelectenerg-900	159	1	in	in	ADP
fuelectenerg-900	159	2	that	that	DET
fuelectenerg-900	159	3	case	case	NOUN
fuelectenerg-900	159	4	,	,	PUNCT
fuelectenerg-900	159	5	the	the	DET
fuelectenerg-900	159	6	mems	mems	PROPN
fuelectenerg-900	159	7	and	and	CCONJ
fuelectenerg-900	159	8	cmos	cmos	NOUN
fuelectenerg-900	159	9	processing	processing	NOUN
fuelectenerg-900	159	10	steps	step	NOUN
fuelectenerg-900	159	11	are	be	AUX
fuelectenerg-900	159	12	optimized	optimize	VERB
fuelectenerg-900	159	13	and	and	CCONJ
fuelectenerg-900	159	14	the	the	DET
fuelectenerg-900	159	15	mutual	mutual	ADJ
fuelectenerg-900	159	16	influence	influence	NOUN
fuelectenerg-900	159	17	is	be	AUX
fuelectenerg-900	159	18	minimized	minimize	VERB
fuelectenerg-900	159	19	.	.	PUNCT
fuelectenerg-900	160	1	however	however	ADV
fuelectenerg-900	160	2	,	,	PUNCT
fuelectenerg-900	160	3	then	then	ADV
fuelectenerg-900	160	4	the	the	DET
fuelectenerg-900	160	5	temperature	temperature	NOUN
fuelectenerg-900	160	6	at	at	ADP
fuelectenerg-900	160	7	which	which	PRON
fuelectenerg-900	160	8	mems	mem	NOUN
fuelectenerg-900	160	9	processing	processing	NOUN
fuelectenerg-900	160	10	steps	step	NOUN
fuelectenerg-900	160	11	are	be	AUX
fuelectenerg-900	160	12	performed	perform	VERB
fuelectenerg-900	160	13	is	be	AUX
fuelectenerg-900	160	14	limited	limit	VERB
fuelectenerg-900	160	15	to	to	ADP
fuelectenerg-900	160	16	450c	450c	NUM
fuelectenerg-900	160	17	,	,	PUNCT
fuelectenerg-900	160	18	which	which	PRON
fuelectenerg-900	160	19	influences	influence	VERB
fuelectenerg-900	160	20	the	the	DET
fuelectenerg-900	160	21	choice	choice	NOUN
fuelectenerg-900	160	22	of	of	ADP
fuelectenerg-900	160	23	resonator	resonator	NOUN
fuelectenerg-900	160	24	material	material	NOUN
fuelectenerg-900	160	25	[	[	X
fuelectenerg-900	160	26	3	3	NUM
fuelectenerg-900	160	27	]	]	PUNCT
fuelectenerg-900	160	28	.	.	PUNCT
fuelectenerg-900	161	1	for	for	ADP
fuelectenerg-900	161	2	example	example	NOUN
fuelectenerg-900	161	3	,	,	PUNCT
fuelectenerg-900	161	4	sige	sige	PROPN
fuelectenerg-900	161	5	and	and	CCONJ
fuelectenerg-900	161	6	ni	ni	PROPN
fuelectenerg-900	161	7	can	can	AUX
fuelectenerg-900	161	8	be	be	AUX
fuelectenerg-900	161	9	processed	process	VERB
fuelectenerg-900	161	10	using	use	VERB
fuelectenerg-900	161	11	low	low	ADJ
fuelectenerg-900	161	12	temperature	temperature	NOUN
fuelectenerg-900	161	13	techniques	technique	NOUN
fuelectenerg-900	161	14	in	in	ADP
fuelectenerg-900	161	15	order	order	NOUN
fuelectenerg-900	161	16	to	to	PART
fuelectenerg-900	161	17	fabricate	fabricate	VERB
fuelectenerg-900	161	18	resonators	resonator	NOUN
fuelectenerg-900	161	19	.	.	PUNCT
fuelectenerg-900	162	1	354	354	NUM
fuelectenerg-900	162	2	i.	i.	NOUN
fuelectenerg-900	162	3	jokić	jokić	PROPN
fuelectenerg-900	162	4	,	,	PUNCT
fuelectenerg-900	162	5	m.	m.	NOUN
fuelectenerg-900	162	6	frantlović	frantlović	NOUN
fuelectenerg-900	162	7	,	,	PUNCT
fuelectenerg-900	162	8	z.	z.	PROPN
fuelectenerg-900	162	9	djurić	djurić	PROPN
fuelectenerg-900	162	10	,	,	PUNCT
fuelectenerg-900	162	11	m.	m.	NOUN
fuelectenerg-900	162	12	l.	l.	PROPN
fuelectenerg-900	162	13	dukić	dukić	PROPN
fuelectenerg-900	162	14	pe	pe	PROPN
fuelectenerg-900	162	15	materials	material	NOUN
fuelectenerg-900	162	16	are	be	AUX
fuelectenerg-900	162	17	not	not	PART
fuelectenerg-900	162	18	standard	standard	ADJ
fuelectenerg-900	162	19	for	for	ADP
fuelectenerg-900	162	20	si	si	PROPN
fuelectenerg-900	162	21	technologies	technology	NOUN
fuelectenerg-900	162	22	,	,	PUNCT
fuelectenerg-900	162	23	which	which	PRON
fuelectenerg-900	162	24	makes	make	VERB
fuelectenerg-900	162	25	the	the	DET
fuelectenerg-900	162	26	integration	integration	NOUN
fuelectenerg-900	162	27	of	of	ADP
fuelectenerg-900	162	28	pe	pe	PROPN
fuelectenerg-900	162	29	mems	mem	NOUN
fuelectenerg-900	162	30	resonators	resonator	NOUN
fuelectenerg-900	162	31	with	with	ADP
fuelectenerg-900	162	32	ics	ic	NOUN
fuelectenerg-900	162	33	difficult	difficult	ADJ
fuelectenerg-900	162	34	,	,	PUNCT
fuelectenerg-900	162	35	with	with	ADP
fuelectenerg-900	162	36	the	the	DET
fuelectenerg-900	162	37	exception	exception	NOUN
fuelectenerg-900	162	38	of	of	ADP
fuelectenerg-900	162	39	the	the	DET
fuelectenerg-900	162	40	resonator	resonator	NOUN
fuelectenerg-900	162	41	with	with	ADP
fuelectenerg-900	162	42	an	an	DET
fuelectenerg-900	162	43	aln	aln	NOUN
fuelectenerg-900	162	44	layer	layer	NOUN
fuelectenerg-900	162	45	.	.	PUNCT
fuelectenerg-900	163	1	mems	mem	NOUN
fuelectenerg-900	163	2	technology	technology	NOUN
fuelectenerg-900	163	3	can	can	AUX
fuelectenerg-900	163	4	be	be	AUX
fuelectenerg-900	163	5	used	use	VERB
fuelectenerg-900	163	6	for	for	ADP
fuelectenerg-900	163	7	the	the	DET
fuelectenerg-900	163	8	fabrication	fabrication	NOUN
fuelectenerg-900	163	9	of	of	ADP
fuelectenerg-900	163	10	pe	pe	PROPN
fuelectenerg-900	163	11	thin	thin	ADJ
fuelectenerg-900	163	12	films	film	NOUN
fuelectenerg-900	163	13	.	.	PUNCT
fuelectenerg-900	164	1	sputtered	sputtered	PROPN
fuelectenerg-900	164	2	aln	aln	PROPN
fuelectenerg-900	164	3	thin	thin	PROPN
fuelectenerg-900	164	4	films	film	NOUN
fuelectenerg-900	164	5	can	can	AUX
fuelectenerg-900	164	6	be	be	AUX
fuelectenerg-900	164	7	processed	process	VERB
fuelectenerg-900	164	8	below	below	ADP
fuelectenerg-900	164	9	450c	450c	NUM
fuelectenerg-900	164	10	and	and	CCONJ
fuelectenerg-900	164	11	they	they	PRON
fuelectenerg-900	164	12	are	be	AUX
fuelectenerg-900	164	13	therefore	therefore	ADV
fuelectenerg-900	164	14	suitable	suitable	ADJ
fuelectenerg-900	164	15	for	for	ADP
fuelectenerg-900	164	16	the	the	DET
fuelectenerg-900	164	17	integration	integration	NOUN
fuelectenerg-900	164	18	of	of	ADP
fuelectenerg-900	164	19	mems	mem	NOUN
fuelectenerg-900	164	20	resonators	resonator	NOUN
fuelectenerg-900	164	21	on	on	ADP
fuelectenerg-900	164	22	top	top	NOUN
fuelectenerg-900	164	23	of	of	ADP
fuelectenerg-900	164	24	cmos	cmos	PROPN
fuelectenerg-900	164	25	circuitry	circuitry	NOUN
fuelectenerg-900	164	26	.	.	PUNCT
fuelectenerg-900	165	1	recent	recent	ADJ
fuelectenerg-900	165	2	technological	technological	ADJ
fuelectenerg-900	165	3	advances	advance	NOUN
fuelectenerg-900	165	4	allow	allow	VERB
fuelectenerg-900	165	5	for	for	ADP
fuelectenerg-900	165	6	the	the	DET
fuelectenerg-900	165	7	integration	integration	NOUN
fuelectenerg-900	165	8	of	of	ADP
fuelectenerg-900	165	9	pe	pe	PROPN
fuelectenerg-900	165	10	resonators	resonator	NOUN
fuelectenerg-900	165	11	with	with	ADP
fuelectenerg-900	165	12	cmos	cmos	ADJ
fuelectenerg-900	165	13	circuits	circuit	NOUN
fuelectenerg-900	165	14	on	on	ADP
fuelectenerg-900	165	15	the	the	DET
fuelectenerg-900	165	16	same	same	ADJ
fuelectenerg-900	165	17	chip	chip	NOUN
fuelectenerg-900	165	18	[	[	X
fuelectenerg-900	165	19	6	6	NUM
fuelectenerg-900	165	20	]	]	PUNCT
fuelectenerg-900	165	21	.	.	PUNCT
fuelectenerg-900	166	1	for	for	ADP
fuelectenerg-900	166	2	example	example	NOUN
fuelectenerg-900	166	3	,	,	PUNCT
fuelectenerg-900	166	4	the	the	DET
fuelectenerg-900	166	5	saw	saw	NOUN
fuelectenerg-900	166	6	resonator	resonator	NOUN
fuelectenerg-900	166	7	(	(	PUNCT
fuelectenerg-900	166	8	q	q	X
fuelectenerg-900	166	9	below	below	ADP
fuelectenerg-900	166	10	500	500	NUM
fuelectenerg-900	166	11	)	)	PUNCT
fuelectenerg-900	166	12	fabricated	fabricate	VERB
fuelectenerg-900	166	13	by	by	ADP
fuelectenerg-900	166	14	combining	combine	VERB
fuelectenerg-900	166	15	a	a	DET
fuelectenerg-900	166	16	standard	standard	ADJ
fuelectenerg-900	166	17	0.6	0.6	NUM
fuelectenerg-900	166	18	μm	μm	NOUN
fuelectenerg-900	166	19	cmos	cmos	NOUN
fuelectenerg-900	166	20	processes	process	NOUN
fuelectenerg-900	166	21	and	and	CCONJ
fuelectenerg-900	166	22	mems	mem	NOUN
fuelectenerg-900	166	23	technology	technology	NOUN
fuelectenerg-900	166	24	[	[	X
fuelectenerg-900	166	25	33	33	NUM
fuelectenerg-900	166	26	]	]	PUNCT
fuelectenerg-900	166	27	is	be	AUX
fuelectenerg-900	166	28	monolithically	monolithically	ADV
fuelectenerg-900	166	29	integrated	integrate	VERB
fuelectenerg-900	166	30	on	on	ADP
fuelectenerg-900	166	31	si	si	X
fuelectenerg-900	166	32	with	with	ADP
fuelectenerg-900	166	33	active	active	ADJ
fuelectenerg-900	166	34	cmos	cmos	ADJ
fuelectenerg-900	166	35	circuits	circuit	NOUN
fuelectenerg-900	166	36	.	.	PUNCT
fuelectenerg-900	167	1	over	over	ADP
fuelectenerg-900	167	2	a	a	DET
fuelectenerg-900	167	3	period	period	NOUN
fuelectenerg-900	167	4	spanning	span	VERB
fuelectenerg-900	167	5	more	more	ADJ
fuelectenerg-900	167	6	than	than	ADP
fuelectenerg-900	167	7	a	a	PRON
fuelectenerg-900	167	8	decade	decade	NOUN
fuelectenerg-900	167	9	,	,	PUNCT
fuelectenerg-900	167	10	great	great	ADJ
fuelectenerg-900	167	11	attention	attention	NOUN
fuelectenerg-900	167	12	has	have	AUX
fuelectenerg-900	167	13	been	be	AUX
fuelectenerg-900	167	14	dedicated	dedicate	VERB
fuelectenerg-900	167	15	to	to	ADP
fuelectenerg-900	167	16	the	the	DET
fuelectenerg-900	167	17	integration	integration	NOUN
fuelectenerg-900	167	18	of	of	ADP
fuelectenerg-900	167	19	fbar	fbar	NOUN
fuelectenerg-900	167	20	with	with	ADP
fuelectenerg-900	167	21	a	a	DET
fuelectenerg-900	167	22	cmos	cmos	ADJ
fuelectenerg-900	167	23	circuits	circuit	NOUN
fuelectenerg-900	167	24	[	[	X
fuelectenerg-900	167	25	34	34	NUM
fuelectenerg-900	167	26	-	-	SYM
fuelectenerg-900	167	27	37	37	NUM
fuelectenerg-900	167	28	]	]	PUNCT
fuelectenerg-900	167	29	.	.	PUNCT
fuelectenerg-900	168	1	fbar	fbar	NOUN
fuelectenerg-900	168	2	filters	filter	NOUN
fuelectenerg-900	168	3	and	and	CCONJ
fuelectenerg-900	168	4	duplexers	duplexer	NOUN
fuelectenerg-900	168	5	are	be	AUX
fuelectenerg-900	168	6	suitable	suitable	ADJ
fuelectenerg-900	168	7	for	for	ADP
fuelectenerg-900	168	8	hybrid	hybrid	ADJ
fuelectenerg-900	168	9	integration	integration	NOUN
fuelectenerg-900	168	10	within	within	ADP
fuelectenerg-900	168	11	the	the	DET
fuelectenerg-900	168	12	mcm	mcm	PROPN
fuelectenerg-900	168	13	(	(	PUNCT
fuelectenerg-900	168	14	multi	multi	ADJ
fuelectenerg-900	168	15	-	-	ADJ
fuelectenerg-900	168	16	chip	chip	NOUN
fuelectenerg-900	168	17	module	module	NOUN
fuelectenerg-900	168	18	)	)	PUNCT
fuelectenerg-900	168	19	.	.	PUNCT
fuelectenerg-900	169	1	the	the	DET
fuelectenerg-900	169	2	monolithic	monolithic	ADJ
fuelectenerg-900	169	3	fbar	fbar	NOUN
fuelectenerg-900	169	4	-	-	PUNCT
fuelectenerg-900	169	5	cmos	cmos	NOUN
fuelectenerg-900	169	6	integration	integration	NOUN
fuelectenerg-900	169	7	is	be	AUX
fuelectenerg-900	169	8	more	more	ADV
fuelectenerg-900	169	9	complicated	complicated	ADJ
fuelectenerg-900	169	10	to	to	PART
fuelectenerg-900	169	11	perform	perform	VERB
fuelectenerg-900	169	12	than	than	SCONJ
fuelectenerg-900	169	13	the	the	DET
fuelectenerg-900	169	14	integration	integration	NOUN
fuelectenerg-900	169	15	of	of	ADP
fuelectenerg-900	169	16	mems	mem	NOUN
fuelectenerg-900	169	17	saw	see	VERB
fuelectenerg-900	169	18	resonators	resonator	NOUN
fuelectenerg-900	169	19	and	and	CCONJ
fuelectenerg-900	169	20	cmos	cmos	PROPN
fuelectenerg-900	169	21	.	.	PUNCT
fuelectenerg-900	170	1	monolithically	monolithically	ADV
fuelectenerg-900	170	2	integrated	integrate	VERB
fuelectenerg-900	170	3	2	2	NUM
fuelectenerg-900	170	4	ghz	ghz	NOUN
fuelectenerg-900	170	5	fbar	fbar	NOUN
fuelectenerg-900	170	6	on	on	ADP
fuelectenerg-900	170	7	si	si	PROPN
fuelectenerg-900	170	8	,	,	PUNCT
fuelectenerg-900	170	9	described	describe	VERB
fuelectenerg-900	170	10	in	in	ADP
fuelectenerg-900	170	11	[	[	X
fuelectenerg-900	170	12	35	35	NUM
fuelectenerg-900	170	13	]	]	PUNCT
fuelectenerg-900	170	14	,	,	PUNCT
fuelectenerg-900	170	15	has	have	VERB
fuelectenerg-900	170	16	q=780	q=780	VERB
fuelectenerg-900	170	17	,	,	PUNCT
fuelectenerg-900	170	18	which	which	PRON
fuelectenerg-900	170	19	is	be	AUX
fuelectenerg-900	170	20	one	one	NUM
fuelectenerg-900	170	21	of	of	ADP
fuelectenerg-900	170	22	better	well	ADJ
fuelectenerg-900	170	23	results	result	NOUN
fuelectenerg-900	170	24	.	.	PUNCT
fuelectenerg-900	171	1	other	other	ADJ
fuelectenerg-900	171	2	aln	aln	PROPN
fuelectenerg-900	171	3	-	-	PUNCT
fuelectenerg-900	171	4	based	base	VERB
fuelectenerg-900	171	5	ghz	ghz	NOUN
fuelectenerg-900	171	6	fbar	fbar	NOUN
fuelectenerg-900	171	7	resonator	resonator	NOUN
fuelectenerg-900	171	8	fabricated	fabricate	VERB
fuelectenerg-900	171	9	on	on	ADP
fuelectenerg-900	171	10	top	top	NOUN
fuelectenerg-900	171	11	of	of	ADP
fuelectenerg-900	171	12	a	a	DET
fuelectenerg-900	171	13	bicmos	bicmos	PROPN
fuelectenerg-900	171	14	circuitry	circuitry	NOUN
fuelectenerg-900	171	15	is	be	AUX
fuelectenerg-900	171	16	presented	present	VERB
fuelectenerg-900	171	17	in	in	ADP
fuelectenerg-900	171	18	[	[	X
fuelectenerg-900	171	19	38	38	NUM
fuelectenerg-900	171	20	]	]	PUNCT
fuelectenerg-900	171	21	.	.	PUNCT
fuelectenerg-900	172	1	lbars	lbar	NOUN
fuelectenerg-900	172	2	fabricated	fabricate	VERB
fuelectenerg-900	172	3	by	by	ADP
fuelectenerg-900	172	4	processes	process	NOUN
fuelectenerg-900	172	5	compatible	compatible	ADJ
fuelectenerg-900	172	6	with	with	ADP
fuelectenerg-900	172	7	si	si	PROPN
fuelectenerg-900	172	8	ic	ic	PROPN
fuelectenerg-900	172	9	technologies	technology	NOUN
fuelectenerg-900	172	10	have	have	VERB
fuelectenerg-900	172	11	better	well	ADJ
fuelectenerg-900	172	12	performance	performance	NOUN
fuelectenerg-900	172	13	than	than	ADP
fuelectenerg-900	172	14	cmoscompatible	cmoscompatible	ADJ
fuelectenerg-900	172	15	fbars	fbar	NOUN
fuelectenerg-900	172	16	.	.	PUNCT
fuelectenerg-900	173	1	an	an	DET
fuelectenerg-900	173	2	example	example	NOUN
fuelectenerg-900	173	3	for	for	ADP
fuelectenerg-900	173	4	this	this	PRON
fuelectenerg-900	173	5	are	be	AUX
fuelectenerg-900	173	6	the	the	DET
fuelectenerg-900	173	7	above	above	ADV
fuelectenerg-900	173	8	-	-	PUNCT
fuelectenerg-900	173	9	mentioned	mention	VERB
fuelectenerg-900	173	10	cmos	cmos	ADJ
fuelectenerg-900	173	11	-	-	PUNCT
fuelectenerg-900	173	12	compatible	compatible	ADJ
fuelectenerg-900	173	13	lbars	lbar	NOUN
fuelectenerg-900	173	14	in	in	ADP
fuelectenerg-900	173	15	the	the	DET
fuelectenerg-900	173	16	form	form	NOUN
fuelectenerg-900	173	17	of	of	ADP
fuelectenerg-900	173	18	contour	contour	NOUN
fuelectenerg-900	173	19	-	-	PUNCT
fuelectenerg-900	173	20	mode	mode	NOUN
fuelectenerg-900	173	21	oscillating	oscillate	VERB
fuelectenerg-900	173	22	aln	aln	PROPN
fuelectenerg-900	173	23	rings	ring	NOUN
fuelectenerg-900	173	24	and	and	CCONJ
fuelectenerg-900	173	25	lfers	lfer	NOUN
fuelectenerg-900	173	26	,	,	PUNCT
fuelectenerg-900	173	27	suitable	suitable	ADJ
fuelectenerg-900	173	28	e.g.	e.g.	ADV
fuelectenerg-900	173	29	for	for	ADP
fuelectenerg-900	173	30	post	post	ADJ
fuelectenerg-900	173	31	-	-	ADJ
fuelectenerg-900	173	32	cmos	cmos	ADJ
fuelectenerg-900	173	33	integrated	integrate	VERB
fuelectenerg-900	173	34	on	on	ADP
fuelectenerg-900	173	35	-	-	PUNCT
fuelectenerg-900	173	36	chip	chip	NOUN
fuelectenerg-900	173	37	direct	direct	ADJ
fuelectenerg-900	173	38	ghz	ghz	NOUN
fuelectenerg-900	173	39	frequency	frequency	NOUN
fuelectenerg-900	173	40	synthesis	synthesis	NOUN
fuelectenerg-900	173	41	in	in	ADP
fuelectenerg-900	173	42	reconfigurable	reconfigurable	ADJ
fuelectenerg-900	173	43	multiband	multiband	NOUN
fuelectenerg-900	173	44	wireless	wireless	NOUN
fuelectenerg-900	173	45	communications	communication	NOUN
fuelectenerg-900	173	46	[	[	X
fuelectenerg-900	173	47	9	9	NUM
fuelectenerg-900	173	48	-	-	SYM
fuelectenerg-900	173	49	11	11	NUM
fuelectenerg-900	173	50	,	,	PUNCT
fuelectenerg-900	173	51	39	39	NUM
fuelectenerg-900	173	52	]	]	PUNCT
fuelectenerg-900	173	53	.	.	PUNCT
fuelectenerg-900	174	1	however	however	ADV
fuelectenerg-900	174	2	,	,	PUNCT
fuelectenerg-900	174	3	it	it	PRON
fuelectenerg-900	174	4	should	should	AUX
fuelectenerg-900	174	5	be	be	AUX
fuelectenerg-900	174	6	pointed	point	VERB
fuelectenerg-900	174	7	out	out	ADP
fuelectenerg-900	174	8	that	that	SCONJ
fuelectenerg-900	174	9	though	though	SCONJ
fuelectenerg-900	174	10	the	the	DET
fuelectenerg-900	174	11	mems	mem	NOUN
fuelectenerg-900	174	12	-	-	PUNCT
fuelectenerg-900	174	13	cmos	cmos	NOUN
fuelectenerg-900	174	14	monolithic	monolithic	ADJ
fuelectenerg-900	174	15	integration	integration	NOUN
fuelectenerg-900	174	16	is	be	AUX
fuelectenerg-900	174	17	desirable	desirable	ADJ
fuelectenerg-900	174	18	in	in	ADP
fuelectenerg-900	174	19	terms	term	NOUN
fuelectenerg-900	174	20	of	of	ADP
fuelectenerg-900	174	21	miniaturization	miniaturization	NOUN
fuelectenerg-900	174	22	,	,	PUNCT
fuelectenerg-900	174	23	it	it	PRON
fuelectenerg-900	174	24	may	may	AUX
fuelectenerg-900	174	25	not	not	PART
fuelectenerg-900	174	26	be	be	AUX
fuelectenerg-900	174	27	the	the	DET
fuelectenerg-900	174	28	best	good	ADJ
fuelectenerg-900	174	29	solution	solution	NOUN
fuelectenerg-900	174	30	in	in	ADP
fuelectenerg-900	174	31	terms	term	NOUN
fuelectenerg-900	174	32	of	of	ADP
fuelectenerg-900	174	33	cost	cost	NOUN
fuelectenerg-900	174	34	.	.	PUNCT
fuelectenerg-900	175	1	mems	mem	NOUN
fuelectenerg-900	175	2	resonators	resonator	NOUN
fuelectenerg-900	175	3	operating	operate	VERB
fuelectenerg-900	175	4	in	in	ADP
fuelectenerg-900	175	5	modes	mode	NOUN
fuelectenerg-900	175	6	in	in	ADP
fuelectenerg-900	175	7	which	which	PRON
fuelectenerg-900	175	8	f0	f0	PROPN
fuelectenerg-900	175	9	depends	depend	VERB
fuelectenerg-900	175	10	on	on	ADP
fuelectenerg-900	175	11	lateral	lateral	ADJ
fuelectenerg-900	175	12	dimensions	dimension	NOUN
fuelectenerg-900	175	13	of	of	ADP
fuelectenerg-900	175	14	a	a	DET
fuelectenerg-900	175	15	resonant	resonant	ADJ
fuelectenerg-900	175	16	structure	structure	NOUN
fuelectenerg-900	175	17	(	(	PUNCT
fuelectenerg-900	175	18	most	most	ADJ
fuelectenerg-900	175	19	of	of	ADP
fuelectenerg-900	175	20	the	the	DET
fuelectenerg-900	175	21	capacitive	capacitive	ADJ
fuelectenerg-900	175	22	bulk	bulk	ADJ
fuelectenerg-900	175	23	modes	mode	NOUN
fuelectenerg-900	175	24	,	,	PUNCT
fuelectenerg-900	175	25	saw	see	VERB
fuelectenerg-900	175	26	,	,	PUNCT
fuelectenerg-900	175	27	lbar	lbar	PROPN
fuelectenerg-900	175	28	)	)	PUNCT
fuelectenerg-900	175	29	are	be	AUX
fuelectenerg-900	175	30	suitable	suitable	ADJ
fuelectenerg-900	175	31	for	for	ADP
fuelectenerg-900	175	32	realization	realization	NOUN
fuelectenerg-900	175	33	of	of	ADP
fuelectenerg-900	175	34	monolithically	monolithically	ADV
fuelectenerg-900	175	35	integrated	integrate	VERB
fuelectenerg-900	175	36	rf	rf	ADJ
fuelectenerg-900	175	37	filter	filter	NOUN
fuelectenerg-900	175	38	banks	bank	NOUN
fuelectenerg-900	175	39	,	,	PUNCT
fuelectenerg-900	175	40	which	which	PRON
fuelectenerg-900	175	41	consists	consist	VERB
fuelectenerg-900	175	42	of	of	ADP
fuelectenerg-900	175	43	a	a	DET
fuelectenerg-900	175	44	large	large	ADJ
fuelectenerg-900	175	45	number	number	NOUN
fuelectenerg-900	175	46	of	of	ADP
fuelectenerg-900	175	47	resonators	resonator	NOUN
fuelectenerg-900	175	48	with	with	ADP
fuelectenerg-900	175	49	different	different	ADJ
fuelectenerg-900	175	50	resonant	resonant	ADJ
fuelectenerg-900	175	51	frequencies	frequency	NOUN
fuelectenerg-900	175	52	.	.	PUNCT
fuelectenerg-900	176	1	switches	switch	NOUN
fuelectenerg-900	176	2	are	be	AUX
fuelectenerg-900	176	3	commonly	commonly	ADV
fuelectenerg-900	176	4	used	use	VERB
fuelectenerg-900	176	5	for	for	ADP
fuelectenerg-900	176	6	the	the	DET
fuelectenerg-900	176	7	selection	selection	NOUN
fuelectenerg-900	176	8	of	of	ADP
fuelectenerg-900	176	9	filters	filter	NOUN
fuelectenerg-900	176	10	from	from	ADP
fuelectenerg-900	176	11	a	a	DET
fuelectenerg-900	176	12	filter	filter	NOUN
fuelectenerg-900	176	13	bank	bank	NOUN
fuelectenerg-900	176	14	.	.	PUNCT
fuelectenerg-900	177	1	due	due	ADP
fuelectenerg-900	177	2	to	to	ADP
fuelectenerg-900	177	3	the	the	DET
fuelectenerg-900	177	4	simple	simple	ADJ
fuelectenerg-900	177	5	filter	filter	NOUN
fuelectenerg-900	177	6	selection	selection	NOUN
fuelectenerg-900	177	7	(	(	PUNCT
fuelectenerg-900	177	8	without	without	ADP
fuelectenerg-900	177	9	switches	switch	NOUN
fuelectenerg-900	177	10	that	that	PRON
fuelectenerg-900	177	11	cause	cause	VERB
fuelectenerg-900	177	12	attenuation	attenuation	NOUN
fuelectenerg-900	177	13	)	)	PUNCT
fuelectenerg-900	177	14	,	,	PUNCT
fuelectenerg-900	177	15	and	and	CCONJ
fuelectenerg-900	177	16	fabrication	fabrication	NOUN
fuelectenerg-900	177	17	compatibility	compatibility	NOUN
fuelectenerg-900	177	18	with	with	ADP
fuelectenerg-900	177	19	si	si	PROPN
fuelectenerg-900	177	20	ic	ic	PROPN
fuelectenerg-900	177	21	technologies	technologies	PROPN
fuelectenerg-900	177	22	,	,	PUNCT
fuelectenerg-900	177	23	capacitive	capacitive	ADJ
fuelectenerg-900	177	24	resonators	resonator	NOUN
fuelectenerg-900	177	25	with	with	ADP
fuelectenerg-900	177	26	bulk	bulk	ADJ
fuelectenerg-900	177	27	oscillating	oscillate	VERB
fuelectenerg-900	177	28	modes	mode	NOUN
fuelectenerg-900	177	29	enable	enable	VERB
fuelectenerg-900	177	30	the	the	DET
fuelectenerg-900	177	31	fabrication	fabrication	NOUN
fuelectenerg-900	177	32	of	of	ADP
fuelectenerg-900	177	33	rf	rf	NOUN
fuelectenerg-900	177	34	filter	filter	NOUN
fuelectenerg-900	177	35	banks	bank	NOUN
fuelectenerg-900	177	36	with	with	ADP
fuelectenerg-900	177	37	minimal	minimal	ADJ
fuelectenerg-900	177	38	dimensions	dimension	NOUN
fuelectenerg-900	177	39	and	and	CCONJ
fuelectenerg-900	177	40	minimal	minimal	ADJ
fuelectenerg-900	177	41	energy	energy	NOUN
fuelectenerg-900	177	42	loss	loss	NOUN
fuelectenerg-900	177	43	,	,	PUNCT
fuelectenerg-900	177	44	monolithically	monolithically	ADV
fuelectenerg-900	177	45	integrated	integrate	VERB
fuelectenerg-900	177	46	with	with	ADP
fuelectenerg-900	177	47	active	active	ADJ
fuelectenerg-900	177	48	cmos	cmos	ADJ
fuelectenerg-900	177	49	circuits	circuit	NOUN
fuelectenerg-900	177	50	.	.	PUNCT
fuelectenerg-900	178	1	the	the	DET
fuelectenerg-900	178	2	change	change	NOUN
fuelectenerg-900	178	3	of	of	ADP
fuelectenerg-900	178	4	the	the	DET
fuelectenerg-900	178	5	resonance	resonance	NOUN
fuelectenerg-900	178	6	frequency	frequency	NOUN
fuelectenerg-900	178	7	in	in	ADP
fuelectenerg-900	178	8	mems	mems	ADJ
fuelectenerg-900	178	9	resonators	resonator	NOUN
fuelectenerg-900	178	10	with	with	ADP
fuelectenerg-900	178	11	temperature	temperature	NOUN
fuelectenerg-900	178	12	is	be	AUX
fuelectenerg-900	178	13	a	a	DET
fuelectenerg-900	178	14	result	result	NOUN
fuelectenerg-900	178	15	of	of	ADP
fuelectenerg-900	178	16	the	the	DET
fuelectenerg-900	178	17	temperature	temperature	NOUN
fuelectenerg-900	178	18	dependence	dependence	NOUN
fuelectenerg-900	178	19	of	of	ADP
fuelectenerg-900	178	20	the	the	DET
fuelectenerg-900	178	21	young	young	ADJ
fuelectenerg-900	178	22	modulus	modulus	NOUN
fuelectenerg-900	178	23	of	of	ADP
fuelectenerg-900	178	24	elasticity	elasticity	NOUN
fuelectenerg-900	178	25	,	,	PUNCT
fuelectenerg-900	178	26	the	the	DET
fuelectenerg-900	178	27	thermal	thermal	ADJ
fuelectenerg-900	178	28	expansion	expansion	NOUN
fuelectenerg-900	178	29	of	of	ADP
fuelectenerg-900	178	30	materials	material	NOUN
fuelectenerg-900	178	31	,	,	PUNCT
fuelectenerg-900	178	32	and	and	CCONJ
fuelectenerg-900	178	33	mechanical	mechanical	ADJ
fuelectenerg-900	178	34	stress	stress	NOUN
fuelectenerg-900	178	35	in	in	ADP
fuelectenerg-900	178	36	the	the	DET
fuelectenerg-900	178	37	resonant	resonant	ADJ
fuelectenerg-900	178	38	structure	structure	NOUN
fuelectenerg-900	178	39	due	due	ADP
fuelectenerg-900	178	40	to	to	ADP
fuelectenerg-900	178	41	different	different	ADJ
fuelectenerg-900	178	42	coefficients	coefficient	NOUN
fuelectenerg-900	178	43	of	of	ADP
fuelectenerg-900	178	44	thermal	thermal	ADJ
fuelectenerg-900	178	45	expansion	expansion	NOUN
fuelectenerg-900	178	46	of	of	ADP
fuelectenerg-900	178	47	the	the	DET
fuelectenerg-900	178	48	resonant	resonant	ADJ
fuelectenerg-900	178	49	structure	structure	NOUN
fuelectenerg-900	178	50	and	and	CCONJ
fuelectenerg-900	178	51	structures	structure	NOUN
fuelectenerg-900	178	52	surrounding	surround	VERB
fuelectenerg-900	178	53	it	it	PRON
fuelectenerg-900	178	54	.	.	PUNCT
fuelectenerg-900	179	1	the	the	DET
fuelectenerg-900	179	2	relative	relative	ADJ
fuelectenerg-900	179	3	change	change	NOUN
fuelectenerg-900	179	4	in	in	ADP
fuelectenerg-900	179	5	the	the	DET
fuelectenerg-900	179	6	resonance	resonance	NOUN
fuelectenerg-900	179	7	frequency	frequency	NOUN
fuelectenerg-900	179	8	in	in	ADP
fuelectenerg-900	179	9	most	most	ADJ
fuelectenerg-900	179	10	mems	mem	NOUN
fuelectenerg-900	179	11	resonators	resonator	NOUN
fuelectenerg-900	179	12	is	be	AUX
fuelectenerg-900	179	13	a	a	DET
fuelectenerg-900	179	14	linear	linear	ADJ
fuelectenerg-900	179	15	function	function	NOUN
fuelectenerg-900	179	16	of	of	ADP
fuelectenerg-900	179	17	temperature	temperature	NOUN
fuelectenerg-900	179	18	,	,	PUNCT
fuelectenerg-900	179	19	with	with	ADP
fuelectenerg-900	179	20	a	a	DET
fuelectenerg-900	179	21	negative	negative	ADJ
fuelectenerg-900	179	22	slope	slope	NOUN
fuelectenerg-900	179	23	[	[	X
fuelectenerg-900	179	24	40	40	NUM
fuelectenerg-900	179	25	]	]	PUNCT
fuelectenerg-900	179	26	.	.	PUNCT
fuelectenerg-900	180	1	the	the	DET
fuelectenerg-900	180	2	temperature	temperature	NOUN
fuelectenerg-900	180	3	coefficient	coefficient	NOUN
fuelectenerg-900	180	4	of	of	ADP
fuelectenerg-900	180	5	frequency	frequency	NOUN
fuelectenerg-900	180	6	of	of	ADP
fuelectenerg-900	180	7	a	a	DET
fuelectenerg-900	180	8	si	si	NOUN
fuelectenerg-900	180	9	resonator	resonator	NOUN
fuelectenerg-900	180	10	is	be	AUX
fuelectenerg-900	180	11	typically	typically	ADV
fuelectenerg-900	180	12	between	between	ADP
fuelectenerg-900	180	13	–	–	PUNCT
fuelectenerg-900	180	14	15	15	NUM
fuelectenerg-900	180	15	ppm/	ppm/	NOUN
fuelectenerg-900	180	16	°	°	NOUN
fuelectenerg-900	180	17	c	c	NOUN
fuelectenerg-900	180	18	and	and	CCONJ
fuelectenerg-900	180	19	–	–	PUNCT
fuelectenerg-900	180	20	30	30	NUM
fuelectenerg-900	180	21	ppm/	ppm/	NOUN
fuelectenerg-900	180	22	°	°	NOUN
fuelectenerg-900	180	23	c	c	NOUN
fuelectenerg-900	180	24	[	[	X
fuelectenerg-900	180	25	40	40	NUM
fuelectenerg-900	180	26	]	]	PUNCT
fuelectenerg-900	180	27	.	.	PUNCT
fuelectenerg-900	181	1	temperature	temperature	NOUN
fuelectenerg-900	181	2	stability	stability	NOUN
fuelectenerg-900	181	3	of	of	ADP
fuelectenerg-900	181	4	the	the	DET
fuelectenerg-900	181	5	frequency	frequency	NOUN
fuelectenerg-900	181	6	of	of	ADP
fuelectenerg-900	181	7	pe	pe	PROPN
fuelectenerg-900	181	8	resonators	resonator	NOUN
fuelectenerg-900	181	9	fabricated	fabricate	VERB
fuelectenerg-900	181	10	using	use	VERB
fuelectenerg-900	181	11	the	the	DET
fuelectenerg-900	181	12	aln	aln	PROPN
fuelectenerg-900	181	13	technology	technology	NOUN
fuelectenerg-900	181	14	is	be	AUX
fuelectenerg-900	181	15	about	about	ADV
fuelectenerg-900	181	16	–	–	PUNCT
fuelectenerg-900	181	17	25	25	NUM
fuelectenerg-900	181	18	ppm/	ppm/	NOUN
fuelectenerg-900	181	19	°	°	NOUN
fuelectenerg-900	181	20	c	c	NOUN
fuelectenerg-900	181	21	[	[	X
fuelectenerg-900	181	22	41	41	NUM
fuelectenerg-900	181	23	]	]	PUNCT
fuelectenerg-900	181	24	.	.	PUNCT
fuelectenerg-900	182	1	these	these	DET
fuelectenerg-900	182	2	values	value	NOUN
fuelectenerg-900	182	3	are	be	AUX
fuelectenerg-900	182	4	acceptable	acceptable	ADJ
fuelectenerg-900	182	5	for	for	ADP
fuelectenerg-900	182	6	the	the	DET
fuelectenerg-900	182	7	implementation	implementation	NOUN
fuelectenerg-900	182	8	of	of	ADP
fuelectenerg-900	182	9	preselect	preselect	NOUN
fuelectenerg-900	182	10	rf	rf	NOUN
fuelectenerg-900	182	11	filters	filter	NOUN
fuelectenerg-900	182	12	and	and	CCONJ
fuelectenerg-900	182	13	rf	rf	NOUN
fuelectenerg-900	182	14	image	image	NOUN
fuelectenerg-900	182	15	-	-	PUNCT
fuelectenerg-900	182	16	rejection	rejection	NOUN
fuelectenerg-900	182	17	filters	filter	NOUN
fuelectenerg-900	182	18	,	,	PUNCT
fuelectenerg-900	182	19	but	but	CCONJ
fuelectenerg-900	182	20	not	not	PART
fuelectenerg-900	182	21	for	for	ADP
fuelectenerg-900	182	22	oscillators	oscillator	NOUN
fuelectenerg-900	182	23	in	in	ADP
fuelectenerg-900	182	24	which	which	PRON
fuelectenerg-900	182	25	temperature	temperature	NOUN
fuelectenerg-900	182	26	stabilization	stabilization	NOUN
fuelectenerg-900	182	27	of	of	ADP
fuelectenerg-900	182	28	frequency	frequency	NOUN
fuelectenerg-900	182	29	is	be	AUX
fuelectenerg-900	182	30	necessary	necessary	ADJ
fuelectenerg-900	182	31	.	.	PUNCT
fuelectenerg-900	183	1	different	different	ADJ
fuelectenerg-900	183	2	methods	method	NOUN
fuelectenerg-900	183	3	for	for	ADP
fuelectenerg-900	183	4	temperature	temperature	NOUN
fuelectenerg-900	183	5	compensation	compensation	NOUN
fuelectenerg-900	183	6	are	be	AUX
fuelectenerg-900	183	7	used	use	VERB
fuelectenerg-900	183	8	in	in	ADP
fuelectenerg-900	183	9	mems	mems	ADJ
fuelectenerg-900	183	10	resonators	resonator	NOUN
fuelectenerg-900	183	11	:	:	PUNCT
fuelectenerg-900	183	12	at	at	ADP
fuelectenerg-900	183	13	the	the	DET
fuelectenerg-900	183	14	level	level	NOUN
fuelectenerg-900	183	15	of	of	ADP
fuelectenerg-900	183	16	fabrication	fabrication	NOUN
fuelectenerg-900	183	17	process	process	NOUN
fuelectenerg-900	183	18	,	,	PUNCT
fuelectenerg-900	183	19	resonator	resonator	NOUN
fuelectenerg-900	183	20	design	design	NOUN
fuelectenerg-900	183	21	or	or	CCONJ
fuelectenerg-900	183	22	external	external	ADJ
fuelectenerg-900	183	23	circuits	circuit	NOUN
fuelectenerg-900	183	24	[	[	X
fuelectenerg-900	183	25	42	42	NUM
fuelectenerg-900	183	26	-	-	SYM
fuelectenerg-900	183	27	48	48	NUM
fuelectenerg-900	183	28	,	,	PUNCT
fuelectenerg-900	183	29	3	3	NUM
fuelectenerg-900	183	30	]	]	PUNCT
fuelectenerg-900	183	31	.	.	PUNCT
fuelectenerg-900	184	1	for	for	ADP
fuelectenerg-900	184	2	example	example	NOUN
fuelectenerg-900	184	3	,	,	PUNCT
fuelectenerg-900	184	4	doping	doping	NOUN
fuelectenerg-900	184	5	of	of	ADP
fuelectenerg-900	184	6	silicon	silicon	NOUN
fuelectenerg-900	184	7	reduces	reduce	VERB
fuelectenerg-900	184	8	the	the	DET
fuelectenerg-900	184	9	temperature	temperature	NOUN
fuelectenerg-900	184	10	-	-	PUNCT
fuelectenerg-900	184	11	dependence	dependence	NOUN
fuelectenerg-900	184	12	of	of	ADP
fuelectenerg-900	184	13	the	the	DET
fuelectenerg-900	184	14	modulus	modulus	NOUN
fuelectenerg-900	184	15	of	of	ADP
fuelectenerg-900	184	16	elasticity	elasticity	NOUN
fuelectenerg-900	184	17	[	[	X
fuelectenerg-900	184	18	45	45	NUM
fuelectenerg-900	184	19	,	,	PUNCT
fuelectenerg-900	184	20	46	46	NUM
fuelectenerg-900	184	21	]	]	PUNCT
fuelectenerg-900	184	22	.	.	PUNCT
fuelectenerg-900	185	1	a	a	DET
fuelectenerg-900	185	2	greater	great	ADJ
fuelectenerg-900	185	3	temperature	temperature	NOUN
fuelectenerg-900	185	4	stability	stability	NOUN
fuelectenerg-900	185	5	of	of	ADP
fuelectenerg-900	185	6	frequency	frequency	NOUN
fuelectenerg-900	185	7	can	can	AUX
fuelectenerg-900	185	8	be	be	AUX
fuelectenerg-900	185	9	achieved	achieve	VERB
fuelectenerg-900	185	10	by	by	ADP
fuelectenerg-900	185	11	fabricating	fabricate	VERB
fuelectenerg-900	185	12	the	the	DET
fuelectenerg-900	185	13	resonator	resonator	NOUN
fuelectenerg-900	185	14	using	use	VERB
fuelectenerg-900	185	15	a	a	DET
fuelectenerg-900	185	16	combination	combination	NOUN
fuelectenerg-900	185	17	of	of	ADP
fuelectenerg-900	185	18	materials	material	NOUN
fuelectenerg-900	185	19	whose	whose	DET
fuelectenerg-900	185	20	thermal	thermal	ADJ
fuelectenerg-900	185	21	expansion	expansion	NOUN
fuelectenerg-900	185	22	rf	rf	NOUN
fuelectenerg-900	185	23	mems	mem	NOUN
fuelectenerg-900	185	24	/	/	SYM
fuelectenerg-900	185	25	nems	nem	NOUN
fuelectenerg-900	185	26	resonators	resonator	NOUN
fuelectenerg-900	185	27	for	for	ADP
fuelectenerg-900	185	28	wireless	wireless	ADJ
fuelectenerg-900	185	29	communication	communication	NOUN
fuelectenerg-900	185	30	systems	system	NOUN
fuelectenerg-900	185	31	and	and	CCONJ
fuelectenerg-900	185	32	adsorption	adsorption	NOUN
fuelectenerg-900	185	33	-	-	PUNCT
fuelectenerg-900	185	34	desorption	desorption	NOUN
fuelectenerg-900	185	35	phase	phase	NOUN
fuelectenerg-900	185	36	noise	noise	NOUN
fuelectenerg-900	185	37	355	355	NUM
fuelectenerg-900	185	38	coefficients	coefficient	NOUN
fuelectenerg-900	185	39	are	be	AUX
fuelectenerg-900	185	40	different	different	ADJ
fuelectenerg-900	185	41	and/or	and/or	CCONJ
fuelectenerg-900	185	42	whose	whose	DET
fuelectenerg-900	185	43	temperature	temperature	NOUN
fuelectenerg-900	185	44	coefficients	coefficient	NOUN
fuelectenerg-900	185	45	of	of	ADP
fuelectenerg-900	185	46	the	the	DET
fuelectenerg-900	185	47	young	young	ADJ
fuelectenerg-900	185	48	modulus	modulus	NOUN
fuelectenerg-900	185	49	are	be	AUX
fuelectenerg-900	185	50	different	different	ADJ
fuelectenerg-900	185	51	,	,	PUNCT
fuelectenerg-900	185	52	so	so	SCONJ
fuelectenerg-900	185	53	that	that	SCONJ
fuelectenerg-900	185	54	an	an	DET
fuelectenerg-900	185	55	appropriate	appropriate	ADJ
fuelectenerg-900	185	56	design	design	NOUN
fuelectenerg-900	185	57	can	can	AUX
fuelectenerg-900	185	58	ensure	ensure	VERB
fuelectenerg-900	185	59	the	the	DET
fuelectenerg-900	185	60	elimination	elimination	NOUN
fuelectenerg-900	185	61	of	of	ADP
fuelectenerg-900	185	62	individual	individual	ADJ
fuelectenerg-900	185	63	effects	effect	NOUN
fuelectenerg-900	185	64	of	of	ADP
fuelectenerg-900	185	65	temperature	temperature	NOUN
fuelectenerg-900	185	66	changes	change	NOUN
fuelectenerg-900	185	67	[	[	X
fuelectenerg-900	185	68	47	47	NUM
fuelectenerg-900	185	69	]	]	PUNCT
fuelectenerg-900	185	70	.	.	PUNCT
fuelectenerg-900	186	1	the	the	DET
fuelectenerg-900	186	2	effective	effective	ADJ
fuelectenerg-900	186	3	stiffness	stiffness	NOUN
fuelectenerg-900	186	4	and	and	CCONJ
fuelectenerg-900	186	5	,	,	PUNCT
fuelectenerg-900	186	6	consequently	consequently	ADV
fuelectenerg-900	186	7	,	,	PUNCT
fuelectenerg-900	186	8	the	the	DET
fuelectenerg-900	186	9	resonance	resonance	NOUN
fuelectenerg-900	186	10	frequency	frequency	NOUN
fuelectenerg-900	186	11	can	can	AUX
fuelectenerg-900	186	12	be	be	AUX
fuelectenerg-900	186	13	varied	varied	ADJ
fuelectenerg-900	186	14	in	in	ADP
fuelectenerg-900	186	15	order	order	NOUN
fuelectenerg-900	186	16	to	to	PART
fuelectenerg-900	186	17	ensure	ensure	VERB
fuelectenerg-900	186	18	temperature	temperature	NOUN
fuelectenerg-900	186	19	compensation	compensation	NOUN
fuelectenerg-900	187	1	[	[	X
fuelectenerg-900	187	2	49	49	NUM
fuelectenerg-900	187	3	]	]	PUNCT
fuelectenerg-900	187	4	.	.	PUNCT
fuelectenerg-900	188	1	this	this	PRON
fuelectenerg-900	188	2	may	may	AUX
fuelectenerg-900	188	3	be	be	AUX
fuelectenerg-900	188	4	achieved	achieve	VERB
fuelectenerg-900	188	5	e.g.	e.g.	ADV
fuelectenerg-900	188	6	by	by	ADP
fuelectenerg-900	188	7	a	a	DET
fuelectenerg-900	188	8	mechanical	mechanical	ADJ
fuelectenerg-900	188	9	deformation	deformation	NOUN
fuelectenerg-900	188	10	of	of	ADP
fuelectenerg-900	188	11	the	the	DET
fuelectenerg-900	188	12	structure	structure	NOUN
fuelectenerg-900	188	13	,	,	PUNCT
fuelectenerg-900	188	14	using	use	VERB
fuelectenerg-900	188	15	temperature	temperature	NOUN
fuelectenerg-900	188	16	-	-	PUNCT
fuelectenerg-900	188	17	dependent	dependent	ADJ
fuelectenerg-900	188	18	mechanical	mechanical	ADJ
fuelectenerg-900	188	19	stress	stress	NOUN
fuelectenerg-900	188	20	[	[	X
fuelectenerg-900	188	21	50	50	NUM
fuelectenerg-900	188	22	]	]	PUNCT
fuelectenerg-900	188	23	.	.	PUNCT
fuelectenerg-900	189	1	the	the	DET
fuelectenerg-900	189	2	adjustment	adjustment	NOUN
fuelectenerg-900	189	3	of	of	ADP
fuelectenerg-900	189	4	the	the	DET
fuelectenerg-900	189	5	resonance	resonance	NOUN
fuelectenerg-900	189	6	frequency	frequency	NOUN
fuelectenerg-900	189	7	can	can	AUX
fuelectenerg-900	189	8	be	be	AUX
fuelectenerg-900	189	9	done	do	VERB
fuelectenerg-900	189	10	by	by	ADP
fuelectenerg-900	189	11	changing	change	VERB
fuelectenerg-900	189	12	the	the	DET
fuelectenerg-900	189	13	gap	gap	NOUN
fuelectenerg-900	189	14	between	between	ADP
fuelectenerg-900	189	15	the	the	DET
fuelectenerg-900	189	16	electrode	electrode	NOUN
fuelectenerg-900	189	17	and	and	CCONJ
fuelectenerg-900	189	18	the	the	DET
fuelectenerg-900	189	19	resonant	resonant	ADJ
fuelectenerg-900	189	20	structure	structure	NOUN
fuelectenerg-900	189	21	[	[	X
fuelectenerg-900	189	22	12	12	NUM
fuelectenerg-900	189	23	]	]	PUNCT
fuelectenerg-900	189	24	,	,	PUNCT
fuelectenerg-900	189	25	the	the	DET
fuelectenerg-900	189	26	electrode	electrode	NOUN
fuelectenerg-900	189	27	overlap	overlap	NOUN
fuelectenerg-900	189	28	area	area	NOUN
fuelectenerg-900	189	29	[	[	X
fuelectenerg-900	189	30	13	13	NUM
fuelectenerg-900	189	31	]	]	PUNCT
fuelectenerg-900	189	32	or	or	CCONJ
fuelectenerg-900	189	33	the	the	DET
fuelectenerg-900	189	34	dc	dc	PROPN
fuelectenerg-900	189	35	bias	bias	NOUN
fuelectenerg-900	189	36	voltage	voltage	NOUN
fuelectenerg-900	189	37	,	,	PUNCT
fuelectenerg-900	189	38	which	which	PRON
fuelectenerg-900	189	39	change	change	VERB
fuelectenerg-900	189	40	the	the	DET
fuelectenerg-900	189	41	effective	effective	ADJ
fuelectenerg-900	189	42	stiffness	stiffness	NOUN
fuelectenerg-900	189	43	as	as	ADP
fuelectenerg-900	189	44	a	a	DET
fuelectenerg-900	189	45	function	function	NOUN
fuelectenerg-900	189	46	of	of	ADP
fuelectenerg-900	189	47	the	the	DET
fuelectenerg-900	189	48	temperature	temperature	NOUN
fuelectenerg-900	189	49	[	[	X
fuelectenerg-900	189	50	48	48	NUM
fuelectenerg-900	189	51	]	]	PUNCT
fuelectenerg-900	189	52	.	.	PUNCT
fuelectenerg-900	190	1	the	the	DET
fuelectenerg-900	190	2	frequency	frequency	NOUN
fuelectenerg-900	190	3	adjustment	adjustment	NOUN
fuelectenerg-900	190	4	range	range	NOUN
fuelectenerg-900	190	5	in	in	ADP
fuelectenerg-900	190	6	capacitive	capacitive	ADJ
fuelectenerg-900	190	7	resonators	resonator	NOUN
fuelectenerg-900	190	8	is	be	AUX
fuelectenerg-900	190	9	larger	large	ADJ
fuelectenerg-900	190	10	than	than	ADP
fuelectenerg-900	190	11	in	in	ADP
fuelectenerg-900	190	12	piezoelectric	piezoelectric	ADJ
fuelectenerg-900	190	13	ones	one	NOUN
fuelectenerg-900	190	14	.	.	PUNCT
fuelectenerg-900	191	1	the	the	DET
fuelectenerg-900	191	2	range	range	NOUN
fuelectenerg-900	191	3	of	of	ADP
fuelectenerg-900	191	4	8.4	8.4	NUM
fuelectenerg-900	191	5	%	%	NOUN
fuelectenerg-900	191	6	has	have	AUX
fuelectenerg-900	191	7	been	be	AUX
fuelectenerg-900	191	8	achieved	achieve	VERB
fuelectenerg-900	191	9	in	in	ADP
fuelectenerg-900	191	10	capacitive	capacitive	ADJ
fuelectenerg-900	191	11	resonators	resonator	NOUN
fuelectenerg-900	191	12	by	by	ADP
fuelectenerg-900	191	13	means	mean	NOUN
fuelectenerg-900	191	14	of	of	ADP
fuelectenerg-900	191	15	integrated	integrated	ADJ
fuelectenerg-900	191	16	heaters	heater	NOUN
fuelectenerg-900	191	17	[	[	X
fuelectenerg-900	191	18	51	51	NUM
fuelectenerg-900	191	19	]	]	PUNCT
fuelectenerg-900	191	20	.	.	PUNCT
fuelectenerg-900	192	1	in	in	ADP
fuelectenerg-900	192	2	fbars	fbar	NOUN
fuelectenerg-900	192	3	operating	operate	VERB
fuelectenerg-900	192	4	above	above	ADP
fuelectenerg-900	192	5	1	1	NUM
fuelectenerg-900	192	6	ghz	ghz	NOUN
fuelectenerg-900	192	7	tuning	tuning	NOUN
fuelectenerg-900	192	8	range	range	NOUN
fuelectenerg-900	192	9	of	of	ADP
fuelectenerg-900	192	10	1.47	1.47	NUM
fuelectenerg-900	192	11	%	%	NOUN
fuelectenerg-900	192	12	is	be	AUX
fuelectenerg-900	192	13	achieved	achieve	VERB
fuelectenerg-900	192	14	by	by	ADP
fuelectenerg-900	192	15	using	use	VERB
fuelectenerg-900	192	16	the	the	DET
fuelectenerg-900	192	17	tuning	tuning	NOUN
fuelectenerg-900	192	18	voltage	voltage	NOUN
fuelectenerg-900	192	19	of	of	ADP
fuelectenerg-900	192	20	7v	7v	NOUN
fuelectenerg-900	192	21	[	[	X
fuelectenerg-900	192	22	52	52	NUM
fuelectenerg-900	192	23	]	]	NUM
fuelectenerg-900	192	24	)	)	PUNCT
fuelectenerg-900	192	25	.	.	PUNCT
fuelectenerg-900	193	1	one	one	NUM
fuelectenerg-900	193	2	of	of	ADP
fuelectenerg-900	193	3	the	the	DET
fuelectenerg-900	193	4	temperature	temperature	NOUN
fuelectenerg-900	193	5	compensation	compensation	NOUN
fuelectenerg-900	193	6	methods	method	NOUN
fuelectenerg-900	193	7	using	use	VERB
fuelectenerg-900	193	8	external	external	ADJ
fuelectenerg-900	193	9	circuits	circuit	NOUN
fuelectenerg-900	193	10	is	be	AUX
fuelectenerg-900	193	11	based	base	VERB
fuelectenerg-900	193	12	on	on	ADP
fuelectenerg-900	193	13	the	the	DET
fuelectenerg-900	193	14	temperature	temperature	NOUN
fuelectenerg-900	193	15	-	-	PUNCT
fuelectenerg-900	193	16	dependent	dependent	ADJ
fuelectenerg-900	193	17	frequency	frequency	NOUN
fuelectenerg-900	193	18	synthesis	synthesis	NOUN
fuelectenerg-900	193	19	.	.	PUNCT
fuelectenerg-900	194	1	by	by	ADP
fuelectenerg-900	194	2	applying	apply	VERB
fuelectenerg-900	194	3	various	various	ADJ
fuelectenerg-900	194	4	methods	method	NOUN
fuelectenerg-900	194	5	of	of	ADP
fuelectenerg-900	194	6	compensation	compensation	NOUN
fuelectenerg-900	194	7	or	or	CCONJ
fuelectenerg-900	194	8	their	their	PRON
fuelectenerg-900	194	9	combination	combination	NOUN
fuelectenerg-900	194	10	in	in	ADP
fuelectenerg-900	194	11	mems	mem	NOUN
fuelectenerg-900	194	12	resonators	resonator	VERB
fuelectenerg-900	194	13	the	the	DET
fuelectenerg-900	194	14	temperature	temperature	NOUN
fuelectenerg-900	194	15	variation	variation	NOUN
fuelectenerg-900	194	16	of	of	ADP
fuelectenerg-900	194	17	the	the	DET
fuelectenerg-900	194	18	frequency	frequency	NOUN
fuelectenerg-900	194	19	is	be	AUX
fuelectenerg-900	194	20	reduced	reduce	VERB
fuelectenerg-900	194	21	to	to	ADP
fuelectenerg-900	194	22	the	the	DET
fuelectenerg-900	194	23	value	value	NOUN
fuelectenerg-900	194	24	of	of	ADP
fuelectenerg-900	194	25	0.1	0.1	NUM
fuelectenerg-900	194	26	-	-	SYM
fuelectenerg-900	194	27	300	300	NUM
fuelectenerg-900	194	28	ppm	ppm	NOUN
fuelectenerg-900	194	29	in	in	ADP
fuelectenerg-900	194	30	the	the	DET
fuelectenerg-900	194	31	temperature	temperature	NOUN
fuelectenerg-900	194	32	range	range	NOUN
fuelectenerg-900	194	33	between	between	ADP
fuelectenerg-900	194	34	60	60	NUM
fuelectenerg-900	194	35	k	k	NOUN
fuelectenerg-900	194	36	and	and	CCONJ
fuelectenerg-900	194	37	200	200	NUM
fuelectenerg-900	195	1	k	k	NOUN
fuelectenerg-900	196	1	[	[	X
fuelectenerg-900	196	2	3	3	NUM
fuelectenerg-900	196	3	]	]	PUNCT
fuelectenerg-900	196	4	.	.	PUNCT
fuelectenerg-900	197	1	in	in	ADP
fuelectenerg-900	197	2	commercial	commercial	ADJ
fuelectenerg-900	197	3	mems	mem	NOUN
fuelectenerg-900	197	4	oscillators	oscillator	NOUN
fuelectenerg-900	197	5	(	(	PUNCT
fuelectenerg-900	197	6	sitime	sitime	PROPN
fuelectenerg-900	197	7	inc	inc	PROPN
fuelectenerg-900	197	8	.	.	PROPN
fuelectenerg-900	197	9	)	)	PUNCT
fuelectenerg-900	197	10	,	,	PUNCT
fuelectenerg-900	197	11	the	the	DET
fuelectenerg-900	197	12	temperature	temperature	NOUN
fuelectenerg-900	197	13	compensation	compensation	NOUN
fuelectenerg-900	197	14	is	be	AUX
fuelectenerg-900	197	15	achieved	achieve	VERB
fuelectenerg-900	197	16	using	use	VERB
fuelectenerg-900	197	17	digital	digital	ADJ
fuelectenerg-900	197	18	techniques	technique	NOUN
fuelectenerg-900	197	19	(	(	PUNCT
fuelectenerg-900	197	20	a	a	DET
fuelectenerg-900	197	21	temperature	temperature	NOUN
fuelectenerg-900	197	22	sensor	sensor	NOUN
fuelectenerg-900	197	23	and	and	CCONJ
fuelectenerg-900	197	24	an	an	DET
fuelectenerg-900	197	25	external	external	ADJ
fuelectenerg-900	197	26	cmos	cmos	NOUN
fuelectenerg-900	197	27	circuit	circuit	NOUN
fuelectenerg-900	197	28	are	be	AUX
fuelectenerg-900	197	29	used	use	VERB
fuelectenerg-900	197	30	)	)	PUNCT
fuelectenerg-900	198	1	[	[	X
fuelectenerg-900	198	2	53	53	NUM
fuelectenerg-900	198	3	]	]	PUNCT
fuelectenerg-900	198	4	.	.	PUNCT
fuelectenerg-900	199	1	long	long	ADJ
fuelectenerg-900	199	2	-	-	PUNCT
fuelectenerg-900	199	3	term	term	NOUN
fuelectenerg-900	199	4	frequency	frequency	NOUN
fuelectenerg-900	199	5	drift	drift	NOUN
fuelectenerg-900	199	6	(	(	PUNCT
fuelectenerg-900	199	7	i.e.	i.e.	X
fuelectenerg-900	199	8	frequency	frequency	NOUN
fuelectenerg-900	199	9	aging	aging	NOUN
fuelectenerg-900	199	10	)	)	PUNCT
fuelectenerg-900	199	11	of	of	ADP
fuelectenerg-900	199	12	mems	mems	ADJ
fuelectenerg-900	199	13	resonators	resonator	NOUN
fuelectenerg-900	199	14	of	of	ADP
fuelectenerg-900	199	15	the	the	DET
fuelectenerg-900	199	16	order	order	NOUN
fuelectenerg-900	199	17	of	of	ADP
fuelectenerg-900	199	18	ppm	ppm	ADJ
fuelectenerg-900	199	19	/	/	SYM
fuelectenerg-900	199	20	year	year	NOUN
fuelectenerg-900	199	21	is	be	AUX
fuelectenerg-900	199	22	observed	observe	VERB
fuelectenerg-900	199	23	[	[	X
fuelectenerg-900	199	24	54	54	NUM
fuelectenerg-900	199	25	]	]	PUNCT
fuelectenerg-900	199	26	,	,	PUNCT
fuelectenerg-900	199	27	and	and	CCONJ
fuelectenerg-900	199	28	it	it	PRON
fuelectenerg-900	199	29	can	can	AUX
fuelectenerg-900	199	30	be	be	AUX
fuelectenerg-900	199	31	as	as	ADV
fuelectenerg-900	199	32	low	low	ADJ
fuelectenerg-900	199	33	as	as	ADP
fuelectenerg-900	199	34	1	1	NUM
fuelectenerg-900	199	35	ppm	ppm	NUM
fuelectenerg-900	199	36	/	/	SYM
fuelectenerg-900	199	37	year	year	NOUN
fuelectenerg-900	199	38	[	[	X
fuelectenerg-900	199	39	53	53	NUM
fuelectenerg-900	199	40	,	,	PUNCT
fuelectenerg-900	199	41	55	55	NUM
fuelectenerg-900	199	42	]	]	PUNCT
fuelectenerg-900	199	43	which	which	PRON
fuelectenerg-900	199	44	is	be	AUX
fuelectenerg-900	199	45	better	well	ADJ
fuelectenerg-900	199	46	than	than	ADP
fuelectenerg-900	199	47	that	that	PRON
fuelectenerg-900	199	48	of	of	ADP
fuelectenerg-900	199	49	a	a	DET
fuelectenerg-900	199	50	typical	typical	ADJ
fuelectenerg-900	199	51	quartz	quartz	NOUN
fuelectenerg-900	199	52	resonator	resonator	NOUN
fuelectenerg-900	199	53	.	.	PUNCT
fuelectenerg-900	200	1	the	the	DET
fuelectenerg-900	200	2	resonance	resonance	NOUN
fuelectenerg-900	200	3	frequency	frequency	NOUN
fuelectenerg-900	200	4	aging	aging	NOUN
fuelectenerg-900	200	5	depends	depend	VERB
fuelectenerg-900	200	6	on	on	ADP
fuelectenerg-900	200	7	the	the	DET
fuelectenerg-900	200	8	hermeticity	hermeticity	NOUN
fuelectenerg-900	200	9	of	of	ADP
fuelectenerg-900	200	10	the	the	DET
fuelectenerg-900	200	11	resonator	resonator	NOUN
fuelectenerg-900	200	12	package	package	NOUN
fuelectenerg-900	200	13	.	.	PUNCT
fuelectenerg-900	201	1	the	the	DET
fuelectenerg-900	201	2	resonance	resonance	NOUN
fuelectenerg-900	201	3	frequency	frequency	NOUN
fuelectenerg-900	201	4	of	of	ADP
fuelectenerg-900	201	5	em	em	PRON
fuelectenerg-900	201	6	resonators	resonator	VERB
fuelectenerg-900	201	7	changes	change	NOUN
fuelectenerg-900	201	8	with	with	ADP
fuelectenerg-900	201	9	pressure	pressure	NOUN
fuelectenerg-900	201	10	variations	variation	NOUN
fuelectenerg-900	201	11	due	due	ADJ
fuelectenerg-900	201	12	to	to	ADP
fuelectenerg-900	201	13	various	various	ADJ
fuelectenerg-900	201	14	effects	effect	NOUN
fuelectenerg-900	201	15	.	.	PUNCT
fuelectenerg-900	202	1	in	in	ADP
fuelectenerg-900	202	2	quartz	quartz	NOUN
fuelectenerg-900	202	3	resonators	resonator	NOUN
fuelectenerg-900	202	4	,	,	PUNCT
fuelectenerg-900	202	5	the	the	DET
fuelectenerg-900	202	6	influence	influence	NOUN
fuelectenerg-900	202	7	of	of	ADP
fuelectenerg-900	202	8	pressure	pressure	NOUN
fuelectenerg-900	202	9	on	on	ADP
fuelectenerg-900	202	10	the	the	DET
fuelectenerg-900	202	11	modulus	modulus	NOUN
fuelectenerg-900	202	12	of	of	ADP
fuelectenerg-900	202	13	elasticity	elasticity	NOUN
fuelectenerg-900	202	14	dominates	dominate	VERB
fuelectenerg-900	202	15	,	,	PUNCT
fuelectenerg-900	202	16	due	due	ADP
fuelectenerg-900	202	17	to	to	ADP
fuelectenerg-900	202	18	which	which	PRON
fuelectenerg-900	202	19	the	the	DET
fuelectenerg-900	202	20	resonance	resonance	NOUN
fuelectenerg-900	202	21	frequency	frequency	NOUN
fuelectenerg-900	202	22	increases	increase	VERB
fuelectenerg-900	202	23	linearly	linearly	ADV
fuelectenerg-900	202	24	with	with	ADP
fuelectenerg-900	202	25	the	the	DET
fuelectenerg-900	202	26	increase	increase	NOUN
fuelectenerg-900	202	27	of	of	ADP
fuelectenerg-900	202	28	pressure	pressure	NOUN
fuelectenerg-900	202	29	[	[	X
fuelectenerg-900	202	30	41	41	NUM
fuelectenerg-900	202	31	]	]	PUNCT
fuelectenerg-900	202	32	.	.	PUNCT
fuelectenerg-900	203	1	the	the	DET
fuelectenerg-900	203	2	resonance	resonance	NOUN
fuelectenerg-900	203	3	frequency	frequency	NOUN
fuelectenerg-900	203	4	of	of	ADP
fuelectenerg-900	203	5	mems	mem	NOUN
fuelectenerg-900	203	6	resonators	resonator	NOUN
fuelectenerg-900	203	7	decreases	decrease	VERB
fuelectenerg-900	203	8	with	with	ADP
fuelectenerg-900	203	9	increasing	increase	VERB
fuelectenerg-900	203	10	pressure	pressure	NOUN
fuelectenerg-900	203	11	,	,	PUNCT
fuelectenerg-900	203	12	probably	probably	ADV
fuelectenerg-900	203	13	due	due	ADJ
fuelectenerg-900	203	14	to	to	ADP
fuelectenerg-900	203	15	adsorption	adsorption	NOUN
fuelectenerg-900	203	16	(	(	PUNCT
fuelectenerg-900	203	17	binding	bind	VERB
fuelectenerg-900	203	18	)	)	PUNCT
fuelectenerg-900	203	19	of	of	ADP
fuelectenerg-900	203	20	the	the	DET
fuelectenerg-900	203	21	particles	particle	NOUN
fuelectenerg-900	203	22	of	of	ADP
fuelectenerg-900	203	23	surrounding	surround	VERB
fuelectenerg-900	203	24	gases	gas	NOUN
fuelectenerg-900	203	25	onto	onto	ADP
fuelectenerg-900	203	26	the	the	DET
fuelectenerg-900	203	27	surface	surface	NOUN
fuelectenerg-900	203	28	of	of	ADP
fuelectenerg-900	203	29	the	the	DET
fuelectenerg-900	203	30	resonator	resonator	NOUN
fuelectenerg-900	203	31	.	.	PUNCT
fuelectenerg-900	204	1	this	this	DET
fuelectenerg-900	204	2	effect	effect	NOUN
fuelectenerg-900	204	3	is	be	AUX
fuelectenerg-900	204	4	more	more	ADV
fuelectenerg-900	204	5	pronounced	pronounce	VERB
fuelectenerg-900	204	6	in	in	ADP
fuelectenerg-900	204	7	resonators	resonator	NOUN
fuelectenerg-900	204	8	of	of	ADP
fuelectenerg-900	204	9	smaller	small	ADJ
fuelectenerg-900	204	10	size	size	NOUN
fuelectenerg-900	204	11	and	and	CCONJ
fuelectenerg-900	204	12	mass	mass	NOUN
fuelectenerg-900	204	13	.	.	PUNCT
fuelectenerg-900	205	1	the	the	DET
fuelectenerg-900	205	2	value	value	NOUN
fuelectenerg-900	205	3	of	of	ADP
fuelectenerg-900	205	4	the	the	DET
fuelectenerg-900	205	5	equivalent	equivalent	ADJ
fuelectenerg-900	205	6	series	series	NOUN
fuelectenerg-900	205	7	resistance	resistance	NOUN
fuelectenerg-900	205	8	(	(	PUNCT
fuelectenerg-900	205	9	also	also	ADV
fuelectenerg-900	205	10	called	call	VERB
fuelectenerg-900	205	11	motional	motional	ADJ
fuelectenerg-900	205	12	resistance	resistance	NOUN
fuelectenerg-900	205	13	)	)	PUNCT
fuelectenerg-900	205	14	,	,	PUNCT
fuelectenerg-900	205	15	rm	rm	PROPN
fuelectenerg-900	205	16	,	,	PUNCT
fuelectenerg-900	205	17	is	be	AUX
fuelectenerg-900	205	18	important	important	ADJ
fuelectenerg-900	205	19	for	for	ADP
fuelectenerg-900	205	20	the	the	DET
fuelectenerg-900	205	21	coupling	coupling	NOUN
fuelectenerg-900	205	22	of	of	ADP
fuelectenerg-900	205	23	a	a	DET
fuelectenerg-900	205	24	resonator	resonator	NOUN
fuelectenerg-900	205	25	with	with	ADP
fuelectenerg-900	205	26	other	other	ADJ
fuelectenerg-900	205	27	rf	rf	ADJ
fuelectenerg-900	205	28	circuits	circuit	NOUN
fuelectenerg-900	205	29	.	.	PUNCT
fuelectenerg-900	206	1	it	it	PRON
fuelectenerg-900	206	2	should	should	AUX
fuelectenerg-900	206	3	be	be	AUX
fuelectenerg-900	206	4	low	low	ADJ
fuelectenerg-900	206	5	enough	enough	ADV
fuelectenerg-900	206	6	for	for	ADP
fuelectenerg-900	206	7	the	the	DET
fuelectenerg-900	206	8	appropriate	appropriate	ADJ
fuelectenerg-900	206	9	matching	matching	NOUN
fuelectenerg-900	206	10	to	to	ADP
fuelectenerg-900	206	11	the	the	DET
fuelectenerg-900	206	12	impedance	impedance	NOUN
fuelectenerg-900	206	13	of	of	ADP
fuelectenerg-900	206	14	conventional	conventional	ADJ
fuelectenerg-900	206	15	rf	rf	ADJ
fuelectenerg-900	206	16	circuits	circuit	NOUN
fuelectenerg-900	206	17	,	,	PUNCT
fuelectenerg-900	206	18	which	which	PRON
fuelectenerg-900	206	19	is	be	AUX
fuelectenerg-900	206	20	typically	typically	ADV
fuelectenerg-900	206	21	50	50	NUM
fuelectenerg-900	206	22	ω	ω	NOUN
fuelectenerg-900	206	23	.	.	PUNCT
fuelectenerg-900	207	1	in	in	ADP
fuelectenerg-900	207	2	filters	filter	NOUN
fuelectenerg-900	207	3	,	,	PUNCT
fuelectenerg-900	207	4	the	the	DET
fuelectenerg-900	207	5	signal	signal	ADJ
fuelectenerg-900	207	6	attenuation	attenuation	NOUN
fuelectenerg-900	207	7	in	in	ADP
fuelectenerg-900	207	8	the	the	DET
fuelectenerg-900	207	9	passband	passband	NOUN
fuelectenerg-900	207	10	is	be	AUX
fuelectenerg-900	207	11	smaller	small	ADJ
fuelectenerg-900	207	12	at	at	ADP
fuelectenerg-900	207	13	lower	low	ADJ
fuelectenerg-900	207	14	values	value	NOUN
fuelectenerg-900	207	15	of	of	ADP
fuelectenerg-900	207	16	series	series	NOUN
fuelectenerg-900	207	17	resistance	resistance	NOUN
fuelectenerg-900	207	18	.	.	PUNCT
fuelectenerg-900	208	1	in	in	ADP
fuelectenerg-900	208	2	oscillators	oscillator	NOUN
fuelectenerg-900	208	3	,	,	PUNCT
fuelectenerg-900	208	4	the	the	DET
fuelectenerg-900	208	5	necessary	necessary	ADJ
fuelectenerg-900	208	6	amplification	amplification	NOUN
fuelectenerg-900	208	7	depends	depend	VERB
fuelectenerg-900	208	8	on	on	ADP
fuelectenerg-900	208	9	rm	rm	PROPN
fuelectenerg-900	208	10	.	.	PUNCT
fuelectenerg-900	209	1	lower	low	ADJ
fuelectenerg-900	209	2	values	value	NOUN
fuelectenerg-900	209	3	of	of	ADP
fuelectenerg-900	209	4	a	a	DET
fuelectenerg-900	209	5	resonator	resonator	NOUN
fuelectenerg-900	209	6	's	's	PART
fuelectenerg-900	209	7	series	series	NOUN
fuelectenerg-900	209	8	resistance	resistance	NOUN
fuelectenerg-900	209	9	in	in	ADP
fuelectenerg-900	209	10	oscillators	oscillator	NOUN
fuelectenerg-900	209	11	enable	enable	VERB
fuelectenerg-900	209	12	the	the	DET
fuelectenerg-900	209	13	amplifier	amplifier	ADJ
fuelectenerg-900	209	14	gain	gain	NOUN
fuelectenerg-900	209	15	to	to	PART
fuelectenerg-900	209	16	be	be	AUX
fuelectenerg-900	209	17	lower	low	ADJ
fuelectenerg-900	209	18	,	,	PUNCT
fuelectenerg-900	209	19	leading	leading	ADJ
fuelectenerg-900	209	20	,	,	PUNCT
fuelectenerg-900	209	21	consequently	consequently	ADV
fuelectenerg-900	209	22	to	to	PART
fuelectenerg-900	209	23	lower	low	ADJ
fuelectenerg-900	209	24	power	power	NOUN
fuelectenerg-900	209	25	consumption	consumption	NOUN
fuelectenerg-900	209	26	.	.	PUNCT
fuelectenerg-900	210	1	at	at	ADP
fuelectenerg-900	210	2	lower	low	ADJ
fuelectenerg-900	210	3	rm	rm	PROPN
fuelectenerg-900	210	4	the	the	DET
fuelectenerg-900	210	5	output	output	NOUN
fuelectenerg-900	210	6	power	power	NOUN
fuelectenerg-900	210	7	is	be	AUX
fuelectenerg-900	210	8	higher	high	ADJ
fuelectenerg-900	210	9	.	.	PUNCT
fuelectenerg-900	211	1	higher	high	ADJ
fuelectenerg-900	211	2	rm	rm	PROPN
fuelectenerg-900	211	3	values	value	NOUN
fuelectenerg-900	211	4	challenge	challenge	VERB
fuelectenerg-900	211	5	the	the	DET
fuelectenerg-900	211	6	fulfillment	fulfillment	NOUN
fuelectenerg-900	211	7	of	of	ADP
fuelectenerg-900	211	8	the	the	DET
fuelectenerg-900	211	9	requirements	requirement	NOUN
fuelectenerg-900	211	10	for	for	ADP
fuelectenerg-900	211	11	starting	start	VERB
fuelectenerg-900	211	12	and	and	CCONJ
fuelectenerg-900	211	13	maintaining	maintain	VERB
fuelectenerg-900	211	14	of	of	ADP
fuelectenerg-900	211	15	oscillations	oscillation	NOUN
fuelectenerg-900	211	16	[	[	X
fuelectenerg-900	211	17	3	3	NUM
fuelectenerg-900	211	18	]	]	PUNCT
fuelectenerg-900	211	19	,	,	PUNCT
fuelectenerg-900	211	20	and	and	CCONJ
fuelectenerg-900	211	21	increase	increase	VERB
fuelectenerg-900	211	22	the	the	DET
fuelectenerg-900	211	23	oscillator	oscillator	NOUN
fuelectenerg-900	211	24	's	's	PART
fuelectenerg-900	211	25	phase	phase	NOUN
fuelectenerg-900	211	26	noise	noise	NOUN
fuelectenerg-900	211	27	.	.	PUNCT
fuelectenerg-900	212	1	capacitive	capacitive	ADJ
fuelectenerg-900	212	2	resonators	resonator	NOUN
fuelectenerg-900	212	3	typically	typically	ADV
fuelectenerg-900	212	4	have	have	VERB
fuelectenerg-900	212	5	rm	rm	NOUN
fuelectenerg-900	212	6	of	of	ADP
fuelectenerg-900	212	7	the	the	DET
fuelectenerg-900	212	8	order	order	NOUN
fuelectenerg-900	212	9	of	of	ADP
fuelectenerg-900	212	10	1	1	NUM
fuelectenerg-900	212	11	-	-	SYM
fuelectenerg-900	212	12	100	100	NUM
fuelectenerg-900	212	13	kω	kω	NOUN
fuelectenerg-900	212	14	(	(	PUNCT
fuelectenerg-900	212	15	regardless	regardless	ADV
fuelectenerg-900	212	16	of	of	ADP
fuelectenerg-900	212	17	the	the	DET
fuelectenerg-900	212	18	resonance	resonance	NOUN
fuelectenerg-900	212	19	frequency	frequency	NOUN
fuelectenerg-900	212	20	[	[	X
fuelectenerg-900	212	21	3	3	NUM
fuelectenerg-900	212	22	]	]	NUM
fuelectenerg-900	212	23	)	)	PUNCT
fuelectenerg-900	212	24	,	,	PUNCT
fuelectenerg-900	212	25	which	which	PRON
fuelectenerg-900	212	26	can	can	AUX
fuelectenerg-900	212	27	be	be	AUX
fuelectenerg-900	212	28	a	a	DET
fuelectenerg-900	212	29	problem	problem	NOUN
fuelectenerg-900	212	30	for	for	ADP
fuelectenerg-900	212	31	coupling	couple	VERB
fuelectenerg-900	212	32	the	the	DET
fuelectenerg-900	212	33	resonators	resonator	NOUN
fuelectenerg-900	212	34	with	with	ADP
fuelectenerg-900	212	35	antennae	antennae	NOUN
fuelectenerg-900	212	36	or	or	CCONJ
fuelectenerg-900	212	37	other	other	ADJ
fuelectenerg-900	212	38	rf	rf	ADJ
fuelectenerg-900	212	39	devices	device	NOUN
fuelectenerg-900	212	40	.	.	PUNCT
fuelectenerg-900	213	1	for	for	ADP
fuelectenerg-900	213	2	example	example	NOUN
fuelectenerg-900	213	3	,	,	PUNCT
fuelectenerg-900	213	4	a	a	DET
fuelectenerg-900	213	5	flexural	flexural	ADJ
fuelectenerg-900	213	6	resonator	resonator	NOUN
fuelectenerg-900	213	7	(	(	PUNCT
fuelectenerg-900	213	8	f0=5.1	f0=5.1	PROPN
fuelectenerg-900	213	9	mhz	mhz	NOUN
fuelectenerg-900	213	10	,	,	PUNCT
fuelectenerg-900	213	11	q=80000	q=80000	PROPN
fuelectenerg-900	213	12	)	)	PUNCT
fuelectenerg-900	213	13	presented	present	VERB
fuelectenerg-900	213	14	in	in	ADP
fuelectenerg-900	213	15	[	[	X
fuelectenerg-900	213	16	31	31	NUM
fuelectenerg-900	213	17	]	]	PUNCT
fuelectenerg-900	213	18	has	have	AUX
fuelectenerg-900	213	19	rm=35	rm=35	PROPN
fuelectenerg-900	213	20	k	k	NOUN
fuelectenerg-900	213	21	;	;	PUNCT
fuelectenerg-900	213	22	the	the	DET
fuelectenerg-900	213	23	si	si	NOUN
fuelectenerg-900	213	24	resonator	resonator	NOUN
fuelectenerg-900	213	25	oscillating	oscillating	NOUN
fuelectenerg-900	213	26	in	in	ADP
fuelectenerg-900	213	27	flexural	flexural	ADJ
fuelectenerg-900	213	28	mode	mode	NOUN
fuelectenerg-900	213	29	(	(	PUNCT
fuelectenerg-900	213	30	f0=1	f0=1	ADJ
fuelectenerg-900	213	31	mhz	mhz	NOUN
fuelectenerg-900	213	32	,	,	PUNCT
fuelectenerg-900	213	33	q=1000	q=1000	PROPN
fuelectenerg-900	213	34	)	)	PUNCT
fuelectenerg-900	213	35	,	,	PUNCT
fuelectenerg-900	213	36	described	describe	VERB
fuelectenerg-900	213	37	in	in	ADP
fuelectenerg-900	213	38	[	[	X
fuelectenerg-900	213	39	56	56	NUM
fuelectenerg-900	213	40	]	]	PUNCT
fuelectenerg-900	213	41	,	,	PUNCT
fuelectenerg-900	213	42	has	have	VERB
fuelectenerg-900	213	43	a	a	DET
fuelectenerg-900	213	44	relatively	relatively	ADV
fuelectenerg-900	213	45	small	small	ADJ
fuelectenerg-900	213	46	value	value	NOUN
fuelectenerg-900	213	47	of	of	ADP
fuelectenerg-900	213	48	motional	motional	ADJ
fuelectenerg-900	213	49	resistance	resistance	NOUN
fuelectenerg-900	213	50	(	(	PUNCT
fuelectenerg-900	213	51	340	340	NUM
fuelectenerg-900	213	52			NUM
fuelectenerg-900	213	53	)	)	PUNCT
fuelectenerg-900	213	54	,	,	PUNCT
fuelectenerg-900	213	55	whereas	whereas	SCONJ
fuelectenerg-900	213	56	the	the	DET
fuelectenerg-900	213	57	flexural	flexural	ADJ
fuelectenerg-900	213	58	si	si	X
fuelectenerg-900	213	59	resonator	resonator	NOUN
fuelectenerg-900	213	60	(	(	PUNCT
fuelectenerg-900	213	61	f0=14	f0=14	NOUN
fuelectenerg-900	213	62	mhz	mhz	NOUN
fuelectenerg-900	213	63	,	,	PUNCT
fuelectenerg-900	213	64	q=1500	q=1500	PROPN
fuelectenerg-900	213	65	)	)	PUNCT
fuelectenerg-900	213	66	from	from	ADP
fuelectenerg-900	213	67	[	[	X
fuelectenerg-900	213	68	57	57	NUM
fuelectenerg-900	213	69	]	]	PUNCT
fuelectenerg-900	213	70	has	have	VERB
fuelectenerg-900	213	71	an	an	DET
fuelectenerg-900	213	72	extremely	extremely	ADV
fuelectenerg-900	213	73	high	high	ADJ
fuelectenerg-900	213	74	value	value	NOUN
fuelectenerg-900	213	75	(	(	PUNCT
fuelectenerg-900	213	76	1	1	NUM
fuelectenerg-900	213	77	m	m	NUM
fuelectenerg-900	213	78	)	)	PUNCT
fuelectenerg-900	213	79	.	.	PUNCT
fuelectenerg-900	214	1	a	a	DET
fuelectenerg-900	214	2	si	si	PROPN
fuelectenerg-900	214	3	square	square	ADJ
fuelectenerg-900	214	4	wine	wine	NOUN
fuelectenerg-900	214	5	-	-	PUNCT
fuelectenerg-900	214	6	glass	glass	NOUN
fuelectenerg-900	214	7	mode	mode	NOUN
fuelectenerg-900	214	8	resonator	resonator	NOUN
fuelectenerg-900	214	9	[	[	X
fuelectenerg-900	214	10	29	29	NUM
fuelectenerg-900	214	11	]	]	PUNCT
fuelectenerg-900	214	12	has	have	VERB
fuelectenerg-900	214	13	rm=10	rm=10	VERB
fuelectenerg-900	214	14	k	k	PROPN
fuelectenerg-900	214	15	(	(	PUNCT
fuelectenerg-900	214	16	f0=2	f0=2	NOUN
fuelectenerg-900	214	17	mhz	mhz	NOUN
fuelectenerg-900	214	18	,	,	PUNCT
fuelectenerg-900	214	19	q=4.0510	q=4.0510	NOUN
fuelectenerg-900	214	20	6	6	NUM
fuelectenerg-900	214	21	)	)	PUNCT
fuelectenerg-900	214	22	.	.	PUNCT
fuelectenerg-900	215	1	motional	motional	ADJ
fuelectenerg-900	215	2	resistance	resistance	NOUN
fuelectenerg-900	215	3	of	of	ADP
fuelectenerg-900	215	4	a	a	DET
fuelectenerg-900	215	5	quadratic	quadratic	ADJ
fuelectenerg-900	215	6	si	si	NOUN
fuelectenerg-900	215	7	plate	plate	NOUN
fuelectenerg-900	215	8	resonator	resonator	NOUN
fuelectenerg-900	215	9	oscillating	oscillating	NOUN
fuelectenerg-900	215	10	in	in	ADP
fuelectenerg-900	215	11	the	the	DET
fuelectenerg-900	215	12	356	356	NUM
fuelectenerg-900	215	13	i.	i.	NOUN
fuelectenerg-900	215	14	jokić	jokić	PROPN
fuelectenerg-900	215	15	,	,	PUNCT
fuelectenerg-900	215	16	m.	m.	NOUN
fuelectenerg-900	215	17	frantlović	frantlović	NOUN
fuelectenerg-900	215	18	,	,	PUNCT
fuelectenerg-900	215	19	z.	z.	PROPN
fuelectenerg-900	215	20	djurić	djurić	PROPN
fuelectenerg-900	215	21	,	,	PUNCT
fuelectenerg-900	215	22	m.	m.	NOUN
fuelectenerg-900	215	23	l.	l.	PROPN
fuelectenerg-900	215	24	dukić	dukić	PROPN
fuelectenerg-900	215	25	contour	contour	NOUN
fuelectenerg-900	215	26	mode	mode	NOUN
fuelectenerg-900	215	27	(	(	PUNCT
fuelectenerg-900	215	28	f0=1.31	f0=1.31	X
fuelectenerg-900	215	29	mhz	mhz	NOUN
fuelectenerg-900	215	30	,	,	PUNCT
fuelectenerg-900	215	31	q=130000	q=130000	PROPN
fuelectenerg-900	215	32	)	)	PUNCT
fuelectenerg-900	215	33	is	be	AUX
fuelectenerg-900	215	34	4.47	4.47	NUM
fuelectenerg-900	215	35	k	k	PROPN
fuelectenerg-900	216	1	[	[	X
fuelectenerg-900	216	2	23	23	NUM
fuelectenerg-900	216	3	]	]	PUNCT
fuelectenerg-900	216	4	.	.	PUNCT
fuelectenerg-900	217	1	the	the	DET
fuelectenerg-900	217	2	resistance	resistance	NOUN
fuelectenerg-900	217	3	of	of	ADP
fuelectenerg-900	217	4	a	a	DET
fuelectenerg-900	217	5	si	si	NOUN
fuelectenerg-900	217	6	bulkmode	bulkmode	ADJ
fuelectenerg-900	217	7	resonator	resonator	NOUN
fuelectenerg-900	217	8	in	in	ADP
fuelectenerg-900	217	9	the	the	DET
fuelectenerg-900	217	10	form	form	NOUN
fuelectenerg-900	217	11	of	of	ADP
fuelectenerg-900	217	12	a	a	DET
fuelectenerg-900	217	13	disk	disk	NOUN
fuelectenerg-900	217	14	(	(	PUNCT
fuelectenerg-900	217	15	2.1	2.1	NUM
fuelectenerg-900	217	16	k	k	NOUN
fuelectenerg-900	217	17	,	,	PUNCT
fuelectenerg-900	217	18	f0=24	f0=24	NOUN
fuelectenerg-900	217	19	mhz	mhz	NOUN
fuelectenerg-900	217	20	,	,	PUNCT
fuelectenerg-900	217	21	q=53000	q=53000	PROPN
fuelectenerg-900	217	22	)	)	PUNCT
fuelectenerg-900	218	1	[	[	X
fuelectenerg-900	218	2	58	58	NUM
fuelectenerg-900	218	3	]	]	PUNCT
fuelectenerg-900	218	4	is	be	AUX
fuelectenerg-900	218	5	of	of	ADP
fuelectenerg-900	218	6	the	the	DET
fuelectenerg-900	218	7	same	same	ADJ
fuelectenerg-900	218	8	order	order	NOUN
fuelectenerg-900	218	9	of	of	ADP
fuelectenerg-900	218	10	magnitude	magnitude	NOUN
fuelectenerg-900	218	11	,	,	PUNCT
fuelectenerg-900	218	12	as	as	ADV
fuelectenerg-900	218	13	well	well	ADV
fuelectenerg-900	218	14	as	as	ADP
fuelectenerg-900	218	15	that	that	PRON
fuelectenerg-900	218	16	of	of	ADP
fuelectenerg-900	218	17	the	the	DET
fuelectenerg-900	218	18	145	145	NUM
fuelectenerg-900	218	19	mhz	mhz	NOUN
fuelectenerg-900	218	20	resonator	resonator	NOUN
fuelectenerg-900	218	21	(	(	PUNCT
fuelectenerg-900	218	22	2.4	2.4	NUM
fuelectenerg-900	218	23	k	k	NOUN
fuelectenerg-900	218	24	)	)	PUNCT
fuelectenerg-900	219	1	[	[	X
fuelectenerg-900	219	2	59	59	NUM
fuelectenerg-900	219	3	]	]	PUNCT
fuelectenerg-900	219	4	.	.	PUNCT
fuelectenerg-900	220	1	si	si	X
fuelectenerg-900	220	2	bulk	bulk	ADJ
fuelectenerg-900	220	3	-	-	PUNCT
fuelectenerg-900	220	4	mode	mode	NOUN
fuelectenerg-900	220	5	resonators	resonator	NOUN
fuelectenerg-900	220	6	presented	present	VERB
fuelectenerg-900	220	7	in	in	ADP
fuelectenerg-900	220	8	[	[	X
fuelectenerg-900	220	9	60	60	NUM
fuelectenerg-900	220	10	]	]	PUNCT
fuelectenerg-900	220	11	(	(	PUNCT
fuelectenerg-900	220	12	f0=13	f0=13	PROPN
fuelectenerg-900	220	13	mhz	mhz	NOUN
fuelectenerg-900	220	14	,	,	PUNCT
fuelectenerg-900	220	15	q=10	q=10	X
fuelectenerg-900	220	16	5	5	NUM
fuelectenerg-900	220	17	)	)	PUNCT
fuelectenerg-900	220	18	and	and	CCONJ
fuelectenerg-900	220	19	[	[	X
fuelectenerg-900	220	20	61	61	NUM
fuelectenerg-900	220	21	]	]	PUNCT
fuelectenerg-900	220	22	(	(	PUNCT
fuelectenerg-900	220	23	f0=60	f0=60	NOUN
fuelectenerg-900	220	24	mhz	mhz	NOUN
fuelectenerg-900	220	25	,	,	PUNCT
fuelectenerg-900	220	26	q=6200	q=6200	PROPN
fuelectenerg-900	220	27	)	)	PUNCT
fuelectenerg-900	220	28	have	have	VERB
fuelectenerg-900	220	29	relatively	relatively	ADV
fuelectenerg-900	220	30	small	small	ADJ
fuelectenerg-900	220	31	values	value	NOUN
fuelectenerg-900	220	32	of	of	ADP
fuelectenerg-900	220	33	rm	rm	PROPN
fuelectenerg-900	220	34	,	,	PUNCT
fuelectenerg-900	220	35	amounting	amount	VERB
fuelectenerg-900	220	36	to	to	ADP
fuelectenerg-900	220	37	500	500	NUM
fuelectenerg-900	220	38			NUM
fuelectenerg-900	220	39	and	and	CCONJ
fuelectenerg-900	220	40	966	966	NUM
fuelectenerg-900	220	41			NUM
fuelectenerg-900	220	42	,	,	PUNCT
fuelectenerg-900	220	43	respectively	respectively	ADV
fuelectenerg-900	220	44	.	.	PUNCT
fuelectenerg-900	221	1	the	the	DET
fuelectenerg-900	221	2	bulk	bulk	ADJ
fuelectenerg-900	221	3	mode	mode	NOUN
fuelectenerg-900	221	4	ring	ring	NOUN
fuelectenerg-900	221	5	resonator	resonator	NOUN
fuelectenerg-900	221	6	described	describe	VERB
fuelectenerg-900	221	7	in	in	ADP
fuelectenerg-900	221	8	[	[	X
fuelectenerg-900	221	9	62	62	NUM
fuelectenerg-900	221	10	]	]	PUNCT
fuelectenerg-900	221	11	has	have	AUX
fuelectenerg-900	221	12	rm=200	rm=200	PROPN
fuelectenerg-900	221	13	k	k	PROPN
fuelectenerg-900	221	14	(	(	PUNCT
fuelectenerg-900	221	15	f0=1.95	f0=1.95	PRON
fuelectenerg-900	221	16	ghz	ghz	NOUN
fuelectenerg-900	221	17	,	,	PUNCT
fuelectenerg-900	221	18	q=8000	q=8000	PROPN
fuelectenerg-900	221	19	)	)	PUNCT
fuelectenerg-900	221	20	.	.	PUNCT
fuelectenerg-900	222	1	the	the	DET
fuelectenerg-900	222	2	reason	reason	NOUN
fuelectenerg-900	222	3	for	for	ADP
fuelectenerg-900	222	4	the	the	DET
fuelectenerg-900	222	5	high	high	ADJ
fuelectenerg-900	222	6	resistance	resistance	NOUN
fuelectenerg-900	222	7	values	value	NOUN
fuelectenerg-900	222	8	is	be	AUX
fuelectenerg-900	222	9	in	in	ADP
fuelectenerg-900	222	10	the	the	DET
fuelectenerg-900	222	11	nature	nature	NOUN
fuelectenerg-900	222	12	of	of	ADP
fuelectenerg-900	222	13	the	the	DET
fuelectenerg-900	222	14	electrostatic	electrostatic	ADJ
fuelectenerg-900	222	15	transduction	transduction	NOUN
fuelectenerg-900	222	16	mechanism	mechanism	NOUN
fuelectenerg-900	222	17	in	in	ADP
fuelectenerg-900	222	18	which	which	PRON
fuelectenerg-900	222	19	a	a	DET
fuelectenerg-900	222	20	low	low	ADJ
fuelectenerg-900	222	21	intensity	intensity	NOUN
fuelectenerg-900	222	22	force	force	NOUN
fuelectenerg-900	222	23	is	be	AUX
fuelectenerg-900	222	24	generated	generate	VERB
fuelectenerg-900	222	25	and	and	CCONJ
fuelectenerg-900	222	26	used	use	VERB
fuelectenerg-900	222	27	for	for	ADP
fuelectenerg-900	222	28	actuation	actuation	NOUN
fuelectenerg-900	222	29	.	.	PUNCT
fuelectenerg-900	223	1	there	there	PRON
fuelectenerg-900	223	2	are	be	VERB
fuelectenerg-900	223	3	several	several	ADJ
fuelectenerg-900	223	4	ways	way	NOUN
fuelectenerg-900	223	5	to	to	PART
fuelectenerg-900	223	6	reduce	reduce	VERB
fuelectenerg-900	223	7	rm	rm	NOUN
fuelectenerg-900	223	8	:	:	PUNCT
fuelectenerg-900	223	9	by	by	ADP
fuelectenerg-900	223	10	using	use	VERB
fuelectenerg-900	223	11	a	a	DET
fuelectenerg-900	223	12	higher	high	ADJ
fuelectenerg-900	223	13	bias	bias	NOUN
fuelectenerg-900	223	14	voltage	voltage	NOUN
fuelectenerg-900	223	15	,	,	PUNCT
fuelectenerg-900	223	16	by	by	ADP
fuelectenerg-900	223	17	reducing	reduce	VERB
fuelectenerg-900	223	18	the	the	DET
fuelectenerg-900	223	19	distance	distance	NOUN
fuelectenerg-900	223	20	between	between	ADP
fuelectenerg-900	223	21	the	the	DET
fuelectenerg-900	223	22	actuation	actuation	NOUN
fuelectenerg-900	223	23	/	/	SYM
fuelectenerg-900	223	24	detection	detection	NOUN
fuelectenerg-900	223	25	electrode	electrode	NOUN
fuelectenerg-900	223	26	and	and	CCONJ
fuelectenerg-900	223	27	the	the	DET
fuelectenerg-900	223	28	resonant	resonant	ADJ
fuelectenerg-900	223	29	structure	structure	NOUN
fuelectenerg-900	223	30	,	,	PUNCT
fuelectenerg-900	223	31	by	by	ADP
fuelectenerg-900	223	32	changing	change	VERB
fuelectenerg-900	223	33	the	the	DET
fuelectenerg-900	223	34	resonator	resonator	NOUN
fuelectenerg-900	223	35	design	design	NOUN
fuelectenerg-900	223	36	(	(	PUNCT
fuelectenerg-900	223	37	ensuring	ensure	VERB
fuelectenerg-900	223	38	a	a	DET
fuelectenerg-900	223	39	greater	great	ADJ
fuelectenerg-900	223	40	overlap	overlap	NOUN
fuelectenerg-900	223	41	surface	surface	NOUN
fuelectenerg-900	223	42	area	area	NOUN
fuelectenerg-900	223	43	of	of	ADP
fuelectenerg-900	223	44	electrodes	electrode	NOUN
fuelectenerg-900	223	45	in	in	ADP
fuelectenerg-900	223	46	capacitive	capacitive	ADJ
fuelectenerg-900	223	47	transducers	transducer	NOUN
fuelectenerg-900	223	48	)	)	PUNCT
fuelectenerg-900	223	49	,	,	PUNCT
fuelectenerg-900	223	50	by	by	ADP
fuelectenerg-900	223	51	using	use	VERB
fuelectenerg-900	223	52	several	several	ADJ
fuelectenerg-900	223	53	mechanically	mechanically	ADV
fuelectenerg-900	223	54	coupled	couple	VERB
fuelectenerg-900	223	55	resonators	resonator	NOUN
fuelectenerg-900	223	56	in	in	ADP
fuelectenerg-900	223	57	parallel	parallel	NOUN
fuelectenerg-900	223	58	,	,	PUNCT
fuelectenerg-900	223	59	etc	etc	X
fuelectenerg-900	223	60	.	.	X
fuelectenerg-900	223	61	pe	pe	PROPN
fuelectenerg-900	223	62	resonators	resonator	NOUN
fuelectenerg-900	223	63	have	have	VERB
fuelectenerg-900	223	64	lower	low	ADJ
fuelectenerg-900	223	65	motional	motional	ADJ
fuelectenerg-900	223	66	resistance	resistance	NOUN
fuelectenerg-900	223	67	compared	compare	VERB
fuelectenerg-900	223	68	to	to	ADP
fuelectenerg-900	223	69	capacitive	capacitive	ADJ
fuelectenerg-900	223	70	ones	one	NOUN
fuelectenerg-900	223	71	similar	similar	ADJ
fuelectenerg-900	223	72	in	in	ADP
fuelectenerg-900	223	73	shape	shape	NOUN
fuelectenerg-900	223	74	and	and	CCONJ
fuelectenerg-900	223	75	size	size	NOUN
fuelectenerg-900	223	76	(	(	PUNCT
fuelectenerg-900	223	77	due	due	ADP
fuelectenerg-900	223	78	to	to	ADP
fuelectenerg-900	223	79	a	a	DET
fuelectenerg-900	223	80	higher	high	ADJ
fuelectenerg-900	223	81	em	em	PRON
fuelectenerg-900	223	82	coupling	couple	VERB
fuelectenerg-900	223	83	coefficient	coefficient	NOUN
fuelectenerg-900	223	84	)	)	PUNCT
fuelectenerg-900	223	85	.	.	PUNCT
fuelectenerg-900	224	1	in	in	ADP
fuelectenerg-900	224	2	addition	addition	NOUN
fuelectenerg-900	224	3	,	,	PUNCT
fuelectenerg-900	224	4	the	the	DET
fuelectenerg-900	224	5	value	value	NOUN
fuelectenerg-900	224	6	of	of	ADP
fuelectenerg-900	224	7	the	the	DET
fuelectenerg-900	224	8	impedance	impedance	NOUN
fuelectenerg-900	224	9	in	in	ADP
fuelectenerg-900	224	10	pe	pe	PROPN
fuelectenerg-900	224	11	resonators	resonator	NOUN
fuelectenerg-900	224	12	decreases	decrease	NOUN
fuelectenerg-900	224	13	with	with	ADP
fuelectenerg-900	224	14	the	the	DET
fuelectenerg-900	224	15	increase	increase	NOUN
fuelectenerg-900	224	16	of	of	ADP
fuelectenerg-900	224	17	f0	f0	PROPN
fuelectenerg-900	224	18	.	.	PUNCT
fuelectenerg-900	225	1	fbars	fbar	NOUN
fuelectenerg-900	225	2	have	have	VERB
fuelectenerg-900	225	3	lower	low	ADJ
fuelectenerg-900	225	4	motional	motional	ADJ
fuelectenerg-900	225	5	resistance	resistance	NOUN
fuelectenerg-900	225	6	than	than	ADP
fuelectenerg-900	225	7	lbars	lbar	NOUN
fuelectenerg-900	225	8	at	at	ADP
fuelectenerg-900	225	9	the	the	DET
fuelectenerg-900	225	10	same	same	ADJ
fuelectenerg-900	225	11	electrode	electrode	NOUN
fuelectenerg-900	225	12	surface	surface	NOUN
fuelectenerg-900	225	13	area	area	NOUN
fuelectenerg-900	225	14	(	(	PUNCT
fuelectenerg-900	225	15	in	in	ADP
fuelectenerg-900	225	16	fbars	fbar	NOUN
fuelectenerg-900	225	17	,	,	PUNCT
fuelectenerg-900	225	18	it	it	PRON
fuelectenerg-900	225	19	is	be	AUX
fuelectenerg-900	225	20	easy	easy	ADJ
fuelectenerg-900	225	21	to	to	PART
fuelectenerg-900	225	22	achieve	achieve	VERB
fuelectenerg-900	225	23	the	the	DET
fuelectenerg-900	225	24	rm	rm	NOUN
fuelectenerg-900	225	25	of	of	ADP
fuelectenerg-900	225	26	50	50	NUM
fuelectenerg-900	225	27	ω	ω	NUM
fuelectenerg-900	225	28	)	)	PUNCT
fuelectenerg-900	225	29	.	.	PUNCT
fuelectenerg-900	226	1	however	however	ADV
fuelectenerg-900	226	2	,	,	PUNCT
fuelectenerg-900	226	3	low	low	ADJ
fuelectenerg-900	226	4	rm	rm	PROPN
fuelectenerg-900	226	5	values	value	NOUN
fuelectenerg-900	226	6	have	have	AUX
fuelectenerg-900	226	7	also	also	ADV
fuelectenerg-900	226	8	been	be	AUX
fuelectenerg-900	226	9	achieved	achieve	VERB
fuelectenerg-900	226	10	in	in	ADP
fuelectenerg-900	226	11	lateral	lateral	ADJ
fuelectenerg-900	226	12	pe	pe	PROPN
fuelectenerg-900	226	13	resonators	resonator	NOUN
fuelectenerg-900	226	14	.	.	PUNCT
fuelectenerg-900	227	1	for	for	ADP
fuelectenerg-900	227	2	example	example	NOUN
fuelectenerg-900	227	3	,	,	PUNCT
fuelectenerg-900	227	4	the	the	DET
fuelectenerg-900	227	5	rm	rm	PROPN
fuelectenerg-900	227	6	of	of	ADP
fuelectenerg-900	227	7	aln	aln	PROPN
fuelectenerg-900	227	8	contour	contour	NOUN
fuelectenerg-900	227	9	-	-	PUNCT
fuelectenerg-900	227	10	mode	mode	NOUN
fuelectenerg-900	227	11	ring	ring	NOUN
fuelectenerg-900	227	12	-	-	PUNCT
fuelectenerg-900	227	13	shaped	shape	VERB
fuelectenerg-900	227	14	resonators	resonator	NOUN
fuelectenerg-900	227	15	(	(	PUNCT
fuelectenerg-900	227	16	f0	f0	PROPN
fuelectenerg-900	227	17	in	in	ADP
fuelectenerg-900	227	18	the	the	DET
fuelectenerg-900	227	19	range	range	NOUN
fuelectenerg-900	227	20	223	223	NUM
fuelectenerg-900	227	21	–	–	PUNCT
fuelectenerg-900	227	22	656	656	NUM
fuelectenerg-900	227	23	mhz	mhz	NOUN
fuelectenerg-900	227	24	)	)	PUNCT
fuelectenerg-900	227	25	is	be	AUX
fuelectenerg-900	227	26	between	between	ADP
fuelectenerg-900	227	27	56	56	NUM
fuelectenerg-900	227	28			NUM
fuelectenerg-900	227	29	and	and	CCONJ
fuelectenerg-900	227	30	205	205	NUM
fuelectenerg-900	227	31			NOUN
fuelectenerg-900	228	1	[	[	X
fuelectenerg-900	228	2	9	9	NUM
fuelectenerg-900	228	3	]	]	PUNCT
fuelectenerg-900	228	4	.	.	PUNCT
fuelectenerg-900	229	1	in	in	ADP
fuelectenerg-900	229	2	lbars	lbar	NOUN
fuelectenerg-900	229	3	in	in	ADP
fuelectenerg-900	229	4	the	the	DET
fuelectenerg-900	229	5	form	form	NOUN
fuelectenerg-900	229	6	of	of	ADP
fuelectenerg-900	229	7	a	a	DET
fuelectenerg-900	229	8	circular	circular	ADJ
fuelectenerg-900	229	9	ring	ring	NOUN
fuelectenerg-900	229	10	,	,	PUNCT
fuelectenerg-900	229	11	the	the	DET
fuelectenerg-900	229	12	series	series	NOUN
fuelectenerg-900	229	13	resistance	resistance	NOUN
fuelectenerg-900	229	14	depends	depend	VERB
fuelectenerg-900	229	15	on	on	ADP
fuelectenerg-900	229	16	the	the	DET
fuelectenerg-900	229	17	mean	mean	ADJ
fuelectenerg-900	229	18	radius	radius	NOUN
fuelectenerg-900	229	19	,	,	PUNCT
fuelectenerg-900	229	20	whereas	whereas	SCONJ
fuelectenerg-900	229	21	in	in	ADP
fuelectenerg-900	229	22	square	square	ADJ
fuelectenerg-900	229	23	ring	ring	NOUN
fuelectenerg-900	229	24	lbars	lbar	NOUN
fuelectenerg-900	229	25	it	it	PRON
fuelectenerg-900	229	26	depends	depend	VERB
fuelectenerg-900	229	27	on	on	ADP
fuelectenerg-900	229	28	the	the	DET
fuelectenerg-900	229	29	mean	mean	ADJ
fuelectenerg-900	229	30	side	side	NOUN
fuelectenerg-900	229	31	length	length	NOUN
fuelectenerg-900	229	32	of	of	ADP
fuelectenerg-900	229	33	the	the	DET
fuelectenerg-900	229	34	basis	basis	NOUN
fuelectenerg-900	229	35	,	,	PUNCT
fuelectenerg-900	229	36	so	so	ADV
fuelectenerg-900	229	37	by	by	SCONJ
fuelectenerg-900	229	38	varying	vary	VERB
fuelectenerg-900	229	39	of	of	ADP
fuelectenerg-900	229	40	those	those	DET
fuelectenerg-900	229	41	dimensions	dimension	NOUN
fuelectenerg-900	229	42	rm	rm	PROPN
fuelectenerg-900	229	43	can	can	AUX
fuelectenerg-900	229	44	be	be	AUX
fuelectenerg-900	229	45	adjusted	adjust	VERB
fuelectenerg-900	229	46	without	without	ADP
fuelectenerg-900	229	47	changing	change	VERB
fuelectenerg-900	229	48	the	the	DET
fuelectenerg-900	229	49	resonant	resonant	ADJ
fuelectenerg-900	229	50	frequency	frequency	NOUN
fuelectenerg-900	229	51	,	,	PUNCT
fuelectenerg-900	229	52	which	which	PRON
fuelectenerg-900	229	53	is	be	AUX
fuelectenerg-900	229	54	determined	determine	VERB
fuelectenerg-900	229	55	by	by	ADP
fuelectenerg-900	229	56	the	the	DET
fuelectenerg-900	229	57	width	width	NOUN
fuelectenerg-900	229	58	of	of	ADP
fuelectenerg-900	229	59	the	the	DET
fuelectenerg-900	229	60	ring	ring	NOUN
fuelectenerg-900	229	61	.	.	PUNCT
fuelectenerg-900	230	1	for	for	ADP
fuelectenerg-900	230	2	example	example	NOUN
fuelectenerg-900	230	3	,	,	PUNCT
fuelectenerg-900	230	4	a	a	DET
fuelectenerg-900	230	5	cmos	cmos	NOUN
fuelectenerg-900	230	6	-	-	PUNCT
fuelectenerg-900	230	7	compatible	compatible	ADJ
fuelectenerg-900	230	8	lfer	lfer	NOUN
fuelectenerg-900	230	9	(	(	PUNCT
fuelectenerg-900	230	10	f0=1.01	f0=1.01	NOUN
fuelectenerg-900	230	11	ghz	ghz	NOUN
fuelectenerg-900	230	12	)	)	PUNCT
fuelectenerg-900	230	13	has	have	AUX
fuelectenerg-900	230	14	rm≈150	rm≈150	NOUN
fuelectenerg-900	230	15			PROPN
fuelectenerg-900	231	1	[	[	X
fuelectenerg-900	231	2	11	11	NUM
fuelectenerg-900	231	3	,	,	PUNCT
fuelectenerg-900	231	4	39	39	NUM
fuelectenerg-900	231	5	]	]	PUNCT
fuelectenerg-900	231	6	.	.	PUNCT
fuelectenerg-900	232	1	when	when	SCONJ
fuelectenerg-900	232	2	the	the	DET
fuelectenerg-900	232	3	amplitude	amplitude	NOUN
fuelectenerg-900	232	4	of	of	ADP
fuelectenerg-900	232	5	oscillation	oscillation	NOUN
fuelectenerg-900	232	6	becomes	become	VERB
fuelectenerg-900	232	7	comparable	comparable	ADJ
fuelectenerg-900	232	8	with	with	ADP
fuelectenerg-900	232	9	the	the	DET
fuelectenerg-900	232	10	characteristic	characteristic	ADJ
fuelectenerg-900	232	11	dimension	dimension	NOUN
fuelectenerg-900	232	12	of	of	ADP
fuelectenerg-900	232	13	the	the	DET
fuelectenerg-900	232	14	resonant	resonant	ADJ
fuelectenerg-900	232	15	structure	structure	NOUN
fuelectenerg-900	232	16	in	in	ADP
fuelectenerg-900	232	17	pe	pe	ADP
fuelectenerg-900	232	18	resonators	resonator	NOUN
fuelectenerg-900	232	19	or	or	CCONJ
fuelectenerg-900	232	20	with	with	ADP
fuelectenerg-900	232	21	the	the	DET
fuelectenerg-900	232	22	distance	distance	NOUN
fuelectenerg-900	232	23	between	between	ADP
fuelectenerg-900	232	24	the	the	DET
fuelectenerg-900	232	25	electrodes	electrode	NOUN
fuelectenerg-900	232	26	of	of	ADP
fuelectenerg-900	232	27	capacitive	capacitive	ADJ
fuelectenerg-900	232	28	resonators	resonator	NOUN
fuelectenerg-900	232	29	,	,	PUNCT
fuelectenerg-900	232	30	the	the	DET
fuelectenerg-900	232	31	em	em	PROPN
fuelectenerg-900	232	32	coupling	couple	VERB
fuelectenerg-900	232	33	coefficient	coefficient	NOUN
fuelectenerg-900	232	34	and	and	CCONJ
fuelectenerg-900	232	35	the	the	DET
fuelectenerg-900	232	36	effective	effective	ADJ
fuelectenerg-900	232	37	stiffness	stiffness	NOUN
fuelectenerg-900	232	38	of	of	ADP
fuelectenerg-900	232	39	the	the	DET
fuelectenerg-900	232	40	resonator	resonator	NOUN
fuelectenerg-900	232	41	start	start	NOUN
fuelectenerg-900	232	42	to	to	PART
fuelectenerg-900	232	43	depend	depend	VERB
fuelectenerg-900	232	44	on	on	ADP
fuelectenerg-900	232	45	the	the	DET
fuelectenerg-900	232	46	deformation	deformation	NOUN
fuelectenerg-900	232	47	,	,	PUNCT
fuelectenerg-900	232	48	i.e.	i.e.	X
fuelectenerg-900	232	49	on	on	ADP
fuelectenerg-900	232	50	the	the	DET
fuelectenerg-900	232	51	amplitude	amplitude	NOUN
fuelectenerg-900	232	52	of	of	ADP
fuelectenerg-900	232	53	the	the	DET
fuelectenerg-900	232	54	alternating	alternate	VERB
fuelectenerg-900	232	55	actuation	actuation	NOUN
fuelectenerg-900	232	56	voltage	voltage	NOUN
fuelectenerg-900	232	57	and	and	CCONJ
fuelectenerg-900	232	58	the	the	DET
fuelectenerg-900	232	59	resonator	resonator	NOUN
fuelectenerg-900	232	60	begins	begin	VERB
fuelectenerg-900	232	61	to	to	PART
fuelectenerg-900	232	62	work	work	VERB
fuelectenerg-900	232	63	in	in	ADP
fuelectenerg-900	232	64	a	a	DET
fuelectenerg-900	232	65	nonlinear	nonlinear	ADJ
fuelectenerg-900	232	66	regime	regime	NOUN
fuelectenerg-900	232	67	[	[	X
fuelectenerg-900	232	68	18	18	NUM
fuelectenerg-900	232	69	,	,	PUNCT
fuelectenerg-900	232	70	63	63	NUM
fuelectenerg-900	232	71	]	]	PUNCT
fuelectenerg-900	232	72	.	.	PUNCT
fuelectenerg-900	233	1	nonlinear	nonlinear	ADJ
fuelectenerg-900	233	2	effects	effect	NOUN
fuelectenerg-900	233	3	are	be	AUX
fuelectenerg-900	233	4	a	a	DET
fuelectenerg-900	233	5	consequence	consequence	NOUN
fuelectenerg-900	233	6	of	of	ADP
fuelectenerg-900	233	7	material	material	NOUN
fuelectenerg-900	233	8	nonlinearities	nonlinearitie	NOUN
fuelectenerg-900	233	9	,	,	PUNCT
fuelectenerg-900	233	10	electromechanical	electromechanical	ADJ
fuelectenerg-900	233	11	coupling	coupling	NOUN
fuelectenerg-900	233	12	,	,	PUNCT
fuelectenerg-900	233	13	or	or	CCONJ
fuelectenerg-900	233	14	they	they	PRON
fuelectenerg-900	233	15	have	have	VERB
fuelectenerg-900	233	16	a	a	DET
fuelectenerg-900	233	17	different	different	ADJ
fuelectenerg-900	233	18	mechanical	mechanical	ADJ
fuelectenerg-900	233	19	origin	origin	NOUN
fuelectenerg-900	233	20	.	.	PUNCT
fuelectenerg-900	234	1	generally	generally	ADV
fuelectenerg-900	234	2	,	,	PUNCT
fuelectenerg-900	234	3	when	when	SCONJ
fuelectenerg-900	234	4	stress	stress	NOUN
fuelectenerg-900	234	5	and	and	CCONJ
fuelectenerg-900	234	6	strain	strain	NOUN
fuelectenerg-900	234	7	reach	reach	VERB
fuelectenerg-900	234	8	a	a	DET
fuelectenerg-900	234	9	certain	certain	ADJ
fuelectenerg-900	234	10	value	value	NOUN
fuelectenerg-900	234	11	,	,	PUNCT
fuelectenerg-900	234	12	a	a	DET
fuelectenerg-900	234	13	linear	linear	ADJ
fuelectenerg-900	234	14	relationship	relationship	NOUN
fuelectenerg-900	234	15	between	between	ADP
fuelectenerg-900	234	16	them	they	PRON
fuelectenerg-900	234	17	ceases	cease	VERB
fuelectenerg-900	234	18	to	to	PART
fuelectenerg-900	234	19	exist	exist	VERB
fuelectenerg-900	234	20	and	and	CCONJ
fuelectenerg-900	234	21	the	the	DET
fuelectenerg-900	234	22	resonator	resonator	NOUN
fuelectenerg-900	234	23	stiffness	stiffness	NOUN
fuelectenerg-900	234	24	constant	constant	ADJ
fuelectenerg-900	234	25	becomes	become	VERB
fuelectenerg-900	234	26	a	a	DET
fuelectenerg-900	234	27	function	function	NOUN
fuelectenerg-900	234	28	of	of	ADP
fuelectenerg-900	234	29	stress	stress	NOUN
fuelectenerg-900	234	30	and	and	CCONJ
fuelectenerg-900	234	31	strain	strain	NOUN
fuelectenerg-900	234	32	.	.	PUNCT
fuelectenerg-900	235	1	in	in	ADP
fuelectenerg-900	235	2	pe	pe	ADP
fuelectenerg-900	235	3	resonators	resonator	NOUN
fuelectenerg-900	235	4	,	,	PUNCT
fuelectenerg-900	235	5	piezoelectric	piezoelectric	ADJ
fuelectenerg-900	235	6	coefficients	coefficient	NOUN
fuelectenerg-900	235	7	begin	begin	VERB
fuelectenerg-900	235	8	to	to	PART
fuelectenerg-900	235	9	non	non	VERB
fuelectenerg-900	235	10	-	-	ADJ
fuelectenerg-900	235	11	linearly	linearly	ADV
fuelectenerg-900	235	12	depend	depend	VERB
fuelectenerg-900	235	13	on	on	ADP
fuelectenerg-900	235	14	strain	strain	NOUN
fuelectenerg-900	235	15	.	.	PUNCT
fuelectenerg-900	236	1	in	in	ADP
fuelectenerg-900	236	2	capacitive	capacitive	ADJ
fuelectenerg-900	236	3	resonators	resonator	NOUN
fuelectenerg-900	236	4	the	the	DET
fuelectenerg-900	236	5	nonlinear	nonlinear	ADJ
fuelectenerg-900	236	6	behavior	behavior	NOUN
fuelectenerg-900	236	7	is	be	AUX
fuelectenerg-900	236	8	partly	partly	ADV
fuelectenerg-900	236	9	a	a	DET
fuelectenerg-900	236	10	direct	direct	ADJ
fuelectenerg-900	236	11	consequence	consequence	NOUN
fuelectenerg-900	236	12	of	of	ADP
fuelectenerg-900	236	13	a	a	DET
fuelectenerg-900	236	14	nonlinear	nonlinear	ADJ
fuelectenerg-900	236	15	relationship	relationship	NOUN
fuelectenerg-900	236	16	between	between	ADP
fuelectenerg-900	236	17	the	the	DET
fuelectenerg-900	236	18	capacitance	capacitance	NOUN
fuelectenerg-900	236	19	and	and	CCONJ
fuelectenerg-900	236	20	the	the	DET
fuelectenerg-900	236	21	change	change	NOUN
fuelectenerg-900	236	22	in	in	ADP
fuelectenerg-900	236	23	the	the	DET
fuelectenerg-900	236	24	distance	distance	NOUN
fuelectenerg-900	236	25	between	between	ADP
fuelectenerg-900	236	26	the	the	DET
fuelectenerg-900	236	27	electrodes	electrode	NOUN
fuelectenerg-900	236	28	.	.	PUNCT
fuelectenerg-900	237	1	in	in	ADP
fuelectenerg-900	237	2	addition	addition	NOUN
fuelectenerg-900	237	3	,	,	PUNCT
fuelectenerg-900	237	4	at	at	ADP
fuelectenerg-900	237	5	high	high	ADJ
fuelectenerg-900	237	6	power	power	NOUN
fuelectenerg-900	237	7	levels	level	NOUN
fuelectenerg-900	237	8	parasitic	parasitic	ADJ
fuelectenerg-900	237	9	modes	mode	NOUN
fuelectenerg-900	237	10	can	can	AUX
fuelectenerg-900	237	11	be	be	AUX
fuelectenerg-900	237	12	excited	excited	ADJ
fuelectenerg-900	237	13	along	along	ADP
fuelectenerg-900	237	14	with	with	ADP
fuelectenerg-900	237	15	the	the	DET
fuelectenerg-900	237	16	desired	desire	VERB
fuelectenerg-900	237	17	mode	mode	NOUN
fuelectenerg-900	237	18	of	of	ADP
fuelectenerg-900	237	19	oscillation	oscillation	NOUN
fuelectenerg-900	237	20	.	.	PUNCT
fuelectenerg-900	238	1	nonlinear	nonlinear	ADJ
fuelectenerg-900	238	2	effects	effect	NOUN
fuelectenerg-900	238	3	limit	limit	VERB
fuelectenerg-900	238	4	the	the	DET
fuelectenerg-900	238	5	maximum	maximum	ADJ
fuelectenerg-900	238	6	amplitude	amplitude	NOUN
fuelectenerg-900	238	7	of	of	ADP
fuelectenerg-900	238	8	oscillation	oscillation	NOUN
fuelectenerg-900	238	9	,	,	PUNCT
fuelectenerg-900	238	10	i.e.	i.e.	X
fuelectenerg-900	238	11	the	the	DET
fuelectenerg-900	238	12	maximum	maximum	ADJ
fuelectenerg-900	238	13	signal	signal	NOUN
fuelectenerg-900	238	14	power	power	NOUN
fuelectenerg-900	238	15	at	at	ADP
fuelectenerg-900	238	16	which	which	PRON
fuelectenerg-900	238	17	the	the	DET
fuelectenerg-900	238	18	resonator	resonator	NOUN
fuelectenerg-900	238	19	operates	operate	VERB
fuelectenerg-900	238	20	in	in	ADP
fuelectenerg-900	238	21	the	the	DET
fuelectenerg-900	238	22	linear	linear	ADJ
fuelectenerg-900	238	23	regime	regime	NOUN
fuelectenerg-900	238	24	.	.	PUNCT
fuelectenerg-900	239	1	however	however	ADV
fuelectenerg-900	239	2	,	,	PUNCT
fuelectenerg-900	239	3	it	it	PRON
fuelectenerg-900	239	4	is	be	AUX
fuelectenerg-900	239	5	desirable	desirable	ADJ
fuelectenerg-900	239	6	that	that	SCONJ
fuelectenerg-900	239	7	the	the	DET
fuelectenerg-900	239	8	amplitude	amplitude	NOUN
fuelectenerg-900	239	9	of	of	ADP
fuelectenerg-900	239	10	oscillation	oscillation	NOUN
fuelectenerg-900	239	11	be	be	AUX
fuelectenerg-900	239	12	as	as	ADV
fuelectenerg-900	239	13	high	high	ADJ
fuelectenerg-900	239	14	as	as	ADP
fuelectenerg-900	239	15	possible	possible	ADJ
fuelectenerg-900	239	16	,	,	PUNCT
fuelectenerg-900	239	17	i.e.	i.e.	X
fuelectenerg-900	239	18	that	that	SCONJ
fuelectenerg-900	239	19	the	the	DET
fuelectenerg-900	239	20	resonator	resonator	NOUN
fuelectenerg-900	239	21	be	be	AUX
fuelectenerg-900	239	22	capable	capable	ADJ
fuelectenerg-900	239	23	of	of	ADP
fuelectenerg-900	239	24	handling	handle	VERB
fuelectenerg-900	239	25	high	high	ADJ
fuelectenerg-900	239	26	power	power	NOUN
fuelectenerg-900	239	27	levels	level	NOUN
fuelectenerg-900	239	28	(	(	PUNCT
fuelectenerg-900	239	29	for	for	ADP
fuelectenerg-900	239	30	example	example	NOUN
fuelectenerg-900	239	31	,	,	PUNCT
fuelectenerg-900	239	32	in	in	ADP
fuelectenerg-900	239	33	order	order	NOUN
fuelectenerg-900	239	34	to	to	PART
fuelectenerg-900	239	35	reduce	reduce	VERB
fuelectenerg-900	239	36	the	the	DET
fuelectenerg-900	239	37	oscillator	oscillator	NOUN
fuelectenerg-900	239	38	phase	phase	NOUN
fuelectenerg-900	239	39	noise	noise	NOUN
fuelectenerg-900	239	40	)	)	PUNCT
fuelectenerg-900	239	41	.	.	PUNCT
fuelectenerg-900	240	1	the	the	DET
fuelectenerg-900	240	2	power	power	NOUN
fuelectenerg-900	240	3	handling	handling	NOUN
fuelectenerg-900	240	4	capability	capability	NOUN
fuelectenerg-900	240	5	of	of	ADP
fuelectenerg-900	240	6	mems	mem	NOUN
fuelectenerg-900	240	7	resonators	resonator	NOUN
fuelectenerg-900	240	8	is	be	AUX
fuelectenerg-900	240	9	lower	low	ADJ
fuelectenerg-900	240	10	than	than	ADP
fuelectenerg-900	240	11	that	that	PRON
fuelectenerg-900	240	12	of	of	ADP
fuelectenerg-900	240	13	quartz	quartz	NOUN
fuelectenerg-900	240	14	resonators	resonator	NOUN
fuelectenerg-900	240	15	.	.	PUNCT
fuelectenerg-900	241	1	for	for	ADP
fuelectenerg-900	241	2	example	example	NOUN
fuelectenerg-900	241	3	,	,	PUNCT
fuelectenerg-900	241	4	in	in	ADP
fuelectenerg-900	241	5	flexural	flexural	ADJ
fuelectenerg-900	241	6	mems	mem	NOUN
fuelectenerg-900	241	7	resonators	resonator	NOUN
fuelectenerg-900	241	8	,	,	PUNCT
fuelectenerg-900	241	9	it	it	PRON
fuelectenerg-900	241	10	is	be	AUX
fuelectenerg-900	241	11	of	of	ADP
fuelectenerg-900	241	12	the	the	DET
fuelectenerg-900	241	13	order	order	NOUN
fuelectenerg-900	241	14	of	of	ADP
fuelectenerg-900	241	15	1	1	NUM
fuelectenerg-900	241	16	μw	μw	NOUN
fuelectenerg-900	241	17	,	,	PUNCT
fuelectenerg-900	241	18	while	while	SCONJ
fuelectenerg-900	241	19	in	in	ADP
fuelectenerg-900	241	20	quartz	quartz	NOUN
fuelectenerg-900	241	21	resonators	resonator	NOUN
fuelectenerg-900	241	22	it	it	PRON
fuelectenerg-900	241	23	is	be	AUX
fuelectenerg-900	241	24	100	100	NUM
fuelectenerg-900	241	25	times	time	NOUN
fuelectenerg-900	241	26	greater	great	ADJ
fuelectenerg-900	241	27	[	[	X
fuelectenerg-900	241	28	18	18	NUM
fuelectenerg-900	241	29	]	]	PUNCT
fuelectenerg-900	241	30	.	.	PUNCT
fuelectenerg-900	242	1	mems	mems	PROPN
fuelectenerg-900	242	2	resonators	resonator	NOUN
fuelectenerg-900	242	3	with	with	ADP
fuelectenerg-900	242	4	a	a	DET
fuelectenerg-900	242	5	higher	high	ADJ
fuelectenerg-900	242	6	stiffness	stiffness	NOUN
fuelectenerg-900	242	7	can	can	AUX
fuelectenerg-900	242	8	be	be	AUX
fuelectenerg-900	242	9	driven	drive	VERB
fuelectenerg-900	242	10	by	by	ADP
fuelectenerg-900	242	11	higher	high	ADJ
fuelectenerg-900	242	12	power	power	NOUN
fuelectenerg-900	242	13	levels	level	NOUN
fuelectenerg-900	242	14	while	while	SCONJ
fuelectenerg-900	242	15	operating	operate	VERB
fuelectenerg-900	242	16	in	in	ADP
fuelectenerg-900	242	17	the	the	DET
fuelectenerg-900	242	18	linear	linear	ADJ
fuelectenerg-900	242	19	regime	regime	NOUN
fuelectenerg-900	242	20	(	(	PUNCT
fuelectenerg-900	242	21	non	non	ADJ
fuelectenerg-900	242	22	-	-	ADJ
fuelectenerg-900	242	23	linear	linear	ADJ
fuelectenerg-900	242	24	effects	effect	NOUN
fuelectenerg-900	242	25	are	be	AUX
fuelectenerg-900	242	26	less	less	ADV
fuelectenerg-900	242	27	pronounced	pronounced	ADJ
fuelectenerg-900	242	28	)	)	PUNCT
fuelectenerg-900	242	29	;	;	PUNCT
fuelectenerg-900	242	30	accordingly	accordingly	ADV
fuelectenerg-900	242	31	,	,	PUNCT
fuelectenerg-900	242	32	the	the	DET
fuelectenerg-900	242	33	resonators	resonator	NOUN
fuelectenerg-900	242	34	which	which	PRON
fuelectenerg-900	242	35	oscillate	oscillate	VERB
fuelectenerg-900	242	36	in	in	ADP
fuelectenerg-900	242	37	bulk	bulk	ADJ
fuelectenerg-900	242	38	modes	mode	NOUN
fuelectenerg-900	242	39	are	be	AUX
fuelectenerg-900	242	40	better	well	ADJ
fuelectenerg-900	242	41	in	in	ADP
fuelectenerg-900	242	42	this	this	DET
fuelectenerg-900	242	43	respect	respect	NOUN
fuelectenerg-900	242	44	than	than	ADP
fuelectenerg-900	242	45	flexural	flexural	ADJ
fuelectenerg-900	242	46	ones	one	NOUN
fuelectenerg-900	242	47	(	(	PUNCT
fuelectenerg-900	242	48	for	for	ADP
fuelectenerg-900	242	49	rf	rf	NOUN
fuelectenerg-900	242	50	mems	mem	NOUN
fuelectenerg-900	242	51	/	/	SYM
fuelectenerg-900	242	52	nems	nem	NOUN
fuelectenerg-900	242	53	resonators	resonator	NOUN
fuelectenerg-900	242	54	for	for	ADP
fuelectenerg-900	242	55	wireless	wireless	ADJ
fuelectenerg-900	242	56	communication	communication	NOUN
fuelectenerg-900	242	57	systems	system	NOUN
fuelectenerg-900	242	58	and	and	CCONJ
fuelectenerg-900	242	59	adsorption	adsorption	NOUN
fuelectenerg-900	242	60	-	-	PUNCT
fuelectenerg-900	242	61	desorption	desorption	NOUN
fuelectenerg-900	242	62	phase	phase	NOUN
fuelectenerg-900	242	63	noise	noise	NOUN
fuelectenerg-900	242	64	357	357	NUM
fuelectenerg-900	242	65	example	example	NOUN
fuelectenerg-900	242	66	,	,	PUNCT
fuelectenerg-900	242	67	maximal	maximal	ADJ
fuelectenerg-900	242	68	power	power	NOUN
fuelectenerg-900	242	69	may	may	AUX
fuelectenerg-900	242	70	be	be	AUX
fuelectenerg-900	242	71	of	of	ADP
fuelectenerg-900	242	72	the	the	DET
fuelectenerg-900	242	73	order	order	NOUN
fuelectenerg-900	242	74	of	of	ADP
fuelectenerg-900	242	75	1	1	NUM
fuelectenerg-900	242	76	mw	mw	NOUN
fuelectenerg-900	242	77	)	)	PUNCT
fuelectenerg-900	242	78	.	.	PUNCT
fuelectenerg-900	243	1	because	because	SCONJ
fuelectenerg-900	243	2	of	of	ADP
fuelectenerg-900	243	3	the	the	DET
fuelectenerg-900	243	4	higher	high	ADJ
fuelectenerg-900	243	5	q	q	NOUN
fuelectenerg-900	243	6	factor	factor	NOUN
fuelectenerg-900	243	7	and	and	CCONJ
fuelectenerg-900	243	8	higher	high	ADJ
fuelectenerg-900	243	9	resonance	resonance	NOUN
fuelectenerg-900	243	10	frequencies	frequency	NOUN
fuelectenerg-900	243	11	compared	compare	VERB
fuelectenerg-900	243	12	to	to	ADP
fuelectenerg-900	243	13	flexural	flexural	ADJ
fuelectenerg-900	243	14	resonators	resonator	NOUN
fuelectenerg-900	243	15	,	,	PUNCT
fuelectenerg-900	243	16	capacitive	capacitive	ADJ
fuelectenerg-900	243	17	resonators	resonator	NOUN
fuelectenerg-900	243	18	with	with	ADP
fuelectenerg-900	243	19	bulk	bulk	ADJ
fuelectenerg-900	243	20	oscillation	oscillation	NOUN
fuelectenerg-900	243	21	modes	mode	NOUN
fuelectenerg-900	243	22	are	be	AUX
fuelectenerg-900	243	23	more	more	ADV
fuelectenerg-900	243	24	suitable	suitable	ADJ
fuelectenerg-900	243	25	for	for	ADP
fuelectenerg-900	243	26	realization	realization	NOUN
fuelectenerg-900	243	27	of	of	ADP
fuelectenerg-900	243	28	filters	filter	NOUN
fuelectenerg-900	243	29	and	and	CCONJ
fuelectenerg-900	243	30	frequency	frequency	NOUN
fuelectenerg-900	243	31	synthesis	synthesis	NOUN
fuelectenerg-900	243	32	in	in	ADP
fuelectenerg-900	243	33	wireless	wireless	ADJ
fuelectenerg-900	243	34	transceivers	transceiver	NOUN
fuelectenerg-900	243	35	.	.	PUNCT
fuelectenerg-900	244	1	a	a	DET
fuelectenerg-900	244	2	smaller	small	ADJ
fuelectenerg-900	244	3	distance	distance	NOUN
fuelectenerg-900	244	4	between	between	ADP
fuelectenerg-900	244	5	the	the	DET
fuelectenerg-900	244	6	electrodes	electrode	NOUN
fuelectenerg-900	244	7	of	of	ADP
fuelectenerg-900	244	8	capacitive	capacitive	ADJ
fuelectenerg-900	244	9	transducers	transducer	NOUN
fuelectenerg-900	244	10	and	and	CCONJ
fuelectenerg-900	244	11	higher	high	ADJ
fuelectenerg-900	244	12	voltage	voltage	NOUN
fuelectenerg-900	244	13	vp	vp	PROPN
fuelectenerg-900	244	14	lead	lead	VERB
fuelectenerg-900	244	15	to	to	ADP
fuelectenerg-900	244	16	the	the	DET
fuelectenerg-900	244	17	increase	increase	NOUN
fuelectenerg-900	244	18	of	of	ADP
fuelectenerg-900	244	19	non	non	ADJ
fuelectenerg-900	244	20	-	-	NOUN
fuelectenerg-900	244	21	linearity	linearity	NOUN
fuelectenerg-900	244	22	and	and	CCONJ
fuelectenerg-900	244	23	reduce	reduce	VERB
fuelectenerg-900	244	24	the	the	DET
fuelectenerg-900	244	25	power	power	NOUN
fuelectenerg-900	244	26	handling	handling	NOUN
fuelectenerg-900	244	27	capability	capability	NOUN
fuelectenerg-900	244	28	.	.	PUNCT
fuelectenerg-900	245	1	capacitive	capacitive	ADJ
fuelectenerg-900	245	2	resonators	resonator	NOUN
fuelectenerg-900	245	3	operate	operate	VERB
fuelectenerg-900	245	4	with	with	ADP
fuelectenerg-900	245	5	a	a	DET
fuelectenerg-900	245	6	higher	high	ADJ
fuelectenerg-900	245	7	signal	signal	NOUN
fuelectenerg-900	245	8	power	power	NOUN
fuelectenerg-900	245	9	in	in	ADP
fuelectenerg-900	245	10	the	the	DET
fuelectenerg-900	245	11	linear	linear	ADJ
fuelectenerg-900	245	12	regime	regime	NOUN
fuelectenerg-900	245	13	if	if	SCONJ
fuelectenerg-900	245	14	the	the	DET
fuelectenerg-900	245	15	overlap	overlap	NOUN
fuelectenerg-900	245	16	surface	surface	NOUN
fuelectenerg-900	245	17	area	area	NOUN
fuelectenerg-900	245	18	of	of	ADP
fuelectenerg-900	245	19	the	the	DET
fuelectenerg-900	245	20	electrodes	electrode	NOUN
fuelectenerg-900	245	21	is	be	AUX
fuelectenerg-900	245	22	larger	large	ADJ
fuelectenerg-900	245	23	.	.	PUNCT
fuelectenerg-900	246	1	resonators	resonator	NOUN
fuelectenerg-900	246	2	with	with	ADP
fuelectenerg-900	246	3	the	the	DET
fuelectenerg-900	246	4	pe	pe	PROPN
fuelectenerg-900	246	5	transduction	transduction	NOUN
fuelectenerg-900	246	6	mechanism	mechanism	NOUN
fuelectenerg-900	246	7	are	be	AUX
fuelectenerg-900	246	8	more	more	ADV
fuelectenerg-900	246	9	linear	linear	ADJ
fuelectenerg-900	246	10	and	and	CCONJ
fuelectenerg-900	246	11	have	have	VERB
fuelectenerg-900	246	12	a	a	DET
fuelectenerg-900	246	13	better	well	ADJ
fuelectenerg-900	246	14	power	power	NOUN
fuelectenerg-900	246	15	handling	handling	NOUN
fuelectenerg-900	246	16	capability	capability	NOUN
fuelectenerg-900	246	17	(	(	PUNCT
fuelectenerg-900	246	18	fbar	fbar	NOUN
fuelectenerg-900	246	19	up	up	ADP
fuelectenerg-900	246	20	to	to	ADP
fuelectenerg-900	246	21	the	the	DET
fuelectenerg-900	246	22	order	order	NOUN
fuelectenerg-900	246	23	of	of	ADP
fuelectenerg-900	246	24	1	1	NUM
fuelectenerg-900	246	25	w	w	NOUN
fuelectenerg-900	246	26	)	)	PUNCT
fuelectenerg-900	246	27	.	.	PUNCT
fuelectenerg-900	247	1	in	in	ADP
fuelectenerg-900	247	2	mems	mems	ADJ
fuelectenerg-900	247	3	resonators	resonator	NOUN
fuelectenerg-900	247	4	,	,	PUNCT
fuelectenerg-900	247	5	a	a	DET
fuelectenerg-900	247	6	higher	high	ADJ
fuelectenerg-900	247	7	output	output	NOUN
fuelectenerg-900	247	8	signal	signal	NOUN
fuelectenerg-900	247	9	power	power	NOUN
fuelectenerg-900	247	10	can	can	AUX
fuelectenerg-900	247	11	be	be	AUX
fuelectenerg-900	247	12	obtained	obtain	VERB
fuelectenerg-900	247	13	using	use	VERB
fuelectenerg-900	247	14	mechanically	mechanically	ADV
fuelectenerg-900	247	15	coupled	couple	VERB
fuelectenerg-900	247	16	parallel	parallel	ADJ
fuelectenerg-900	247	17	resonator	resonator	NOUN
fuelectenerg-900	247	18	arrays	array	VERB
fuelectenerg-900	247	19	[	[	X
fuelectenerg-900	247	20	64	64	NUM
fuelectenerg-900	247	21	]	]	PUNCT
fuelectenerg-900	247	22	.	.	PUNCT
fuelectenerg-900	248	1	based	base	VERB
fuelectenerg-900	248	2	on	on	ADP
fuelectenerg-900	248	3	the	the	DET
fuelectenerg-900	248	4	achieved	achieve	VERB
fuelectenerg-900	248	5	parameter	parameter	NOUN
fuelectenerg-900	248	6	values	value	NOUN
fuelectenerg-900	248	7	,	,	PUNCT
fuelectenerg-900	248	8	dimensions	dimension	NOUN
fuelectenerg-900	248	9	and	and	CCONJ
fuelectenerg-900	248	10	cmos	cmos	NOUN
fuelectenerg-900	248	11	compatibility	compatibility	NOUN
fuelectenerg-900	248	12	,	,	PUNCT
fuelectenerg-900	248	13	rf	rf	NOUN
fuelectenerg-900	248	14	mems	mem	NOUN
fuelectenerg-900	248	15	resonators	resonator	NOUN
fuelectenerg-900	248	16	are	be	AUX
fuelectenerg-900	248	17	considered	consider	VERB
fuelectenerg-900	248	18	as	as	ADP
fuelectenerg-900	248	19	a	a	DET
fuelectenerg-900	248	20	solution	solution	NOUN
fuelectenerg-900	248	21	for	for	ADP
fuelectenerg-900	248	22	realization	realization	NOUN
fuelectenerg-900	248	23	of	of	ADP
fuelectenerg-900	248	24	fully	fully	ADV
fuelectenerg-900	248	25	integrated	integrate	VERB
fuelectenerg-900	248	26	rf	rf	NOUN
fuelectenerg-900	248	27	systems	system	NOUN
fuelectenerg-900	248	28	.	.	PUNCT
fuelectenerg-900	249	1	however	however	ADV
fuelectenerg-900	249	2	,	,	PUNCT
fuelectenerg-900	249	3	the	the	DET
fuelectenerg-900	249	4	potential	potential	NOUN
fuelectenerg-900	249	5	of	of	ADP
fuelectenerg-900	249	6	rf	rf	NOUN
fuelectenerg-900	249	7	mems	mem	NOUN
fuelectenerg-900	249	8	resonators	resonator	NOUN
fuelectenerg-900	249	9	for	for	ADP
fuelectenerg-900	249	10	applications	application	NOUN
fuelectenerg-900	249	11	in	in	ADP
fuelectenerg-900	249	12	wireless	wireless	ADJ
fuelectenerg-900	249	13	communications	communication	NOUN
fuelectenerg-900	249	14	has	have	AUX
fuelectenerg-900	249	15	not	not	PART
fuelectenerg-900	249	16	been	be	AUX
fuelectenerg-900	249	17	sufficiently	sufficiently	ADV
fuelectenerg-900	249	18	exploited	exploit	VERB
fuelectenerg-900	249	19	yet	yet	ADV
fuelectenerg-900	249	20	.	.	PUNCT
fuelectenerg-900	250	1	in	in	ADP
fuelectenerg-900	250	2	the	the	DET
fuelectenerg-900	250	3	case	case	NOUN
fuelectenerg-900	250	4	of	of	ADP
fuelectenerg-900	250	5	capacitive	capacitive	ADJ
fuelectenerg-900	250	6	resonators	resonator	NOUN
fuelectenerg-900	250	7	,	,	PUNCT
fuelectenerg-900	250	8	remaining	remain	VERB
fuelectenerg-900	250	9	problems	problem	NOUN
fuelectenerg-900	250	10	that	that	PRON
fuelectenerg-900	250	11	prevent	prevent	VERB
fuelectenerg-900	250	12	wider	wide	ADJ
fuelectenerg-900	250	13	practical	practical	ADJ
fuelectenerg-900	250	14	application	application	NOUN
fuelectenerg-900	250	15	are	be	AUX
fuelectenerg-900	250	16	high	high	ADJ
fuelectenerg-900	250	17	motional	motional	ADJ
fuelectenerg-900	250	18	resistance	resistance	NOUN
fuelectenerg-900	250	19	and	and	CCONJ
fuelectenerg-900	250	20	insufficient	insufficient	ADJ
fuelectenerg-900	250	21	power	power	NOUN
fuelectenerg-900	250	22	handling	handling	NOUN
fuelectenerg-900	250	23	,	,	PUNCT
fuelectenerg-900	250	24	while	while	SCONJ
fuelectenerg-900	250	25	in	in	ADP
fuelectenerg-900	250	26	the	the	DET
fuelectenerg-900	250	27	case	case	NOUN
fuelectenerg-900	250	28	of	of	ADP
fuelectenerg-900	250	29	high	high	ADJ
fuelectenerg-900	250	30	f0	f0	PROPN
fuelectenerg-900	250	31	pe	pe	PROPN
fuelectenerg-900	250	32	resonators	resonator	NOUN
fuelectenerg-900	250	33	it	it	PRON
fuelectenerg-900	250	34	is	be	AUX
fuelectenerg-900	250	35	a	a	DET
fuelectenerg-900	250	36	low	low	ADJ
fuelectenerg-900	250	37	q	q	NOUN
fuelectenerg-900	250	38	(	(	PUNCT
fuelectenerg-900	250	39	limited	limit	VERB
fuelectenerg-900	250	40	to	to	ADP
fuelectenerg-900	250	41	several	several	ADJ
fuelectenerg-900	250	42	thousand	thousand	NUM
fuelectenerg-900	250	43	)	)	PUNCT
fuelectenerg-900	250	44	.	.	PUNCT
fuelectenerg-900	251	1	nevertheless	nevertheless	ADV
fuelectenerg-900	251	2	,	,	PUNCT
fuelectenerg-900	251	3	significant	significant	ADJ
fuelectenerg-900	251	4	results	result	NOUN
fuelectenerg-900	251	5	achieved	achieve	VERB
fuelectenerg-900	251	6	after	after	ADP
fuelectenerg-900	251	7	the	the	DET
fuelectenerg-900	251	8	year	year	NOUN
fuelectenerg-900	251	9	2000	2000	NUM
fuelectenerg-900	251	10	(	(	PUNCT
fuelectenerg-900	251	11	especially	especially	ADV
fuelectenerg-900	251	12	in	in	ADP
fuelectenerg-900	251	13	terms	term	NOUN
fuelectenerg-900	251	14	of	of	ADP
fuelectenerg-900	251	15	better	well	ADJ
fuelectenerg-900	251	16	temperature	temperature	NOUN
fuelectenerg-900	251	17	stability	stability	NOUN
fuelectenerg-900	251	18	,	,	PUNCT
fuelectenerg-900	251	19	better	well	ADJ
fuelectenerg-900	251	20	long	long	ADJ
fuelectenerg-900	251	21	-	-	PUNCT
fuelectenerg-900	251	22	term	term	NOUN
fuelectenerg-900	251	23	stability	stability	NOUN
fuelectenerg-900	251	24	,	,	PUNCT
fuelectenerg-900	251	25	improved	improved	ADJ
fuelectenerg-900	251	26	packaging	packaging	NOUN
fuelectenerg-900	251	27	)	)	PUNCT
fuelectenerg-900	251	28	have	have	AUX
fuelectenerg-900	251	29	enabled	enable	VERB
fuelectenerg-900	251	30	the	the	DET
fuelectenerg-900	251	31	commercialization	commercialization	NOUN
fuelectenerg-900	251	32	of	of	ADP
fuelectenerg-900	251	33	both	both	PRON
fuelectenerg-900	251	34	pe	pe	X
fuelectenerg-900	251	35	and	and	CCONJ
fuelectenerg-900	251	36	capacitive	capacitive	ADJ
fuelectenerg-900	251	37	mems	mem	NOUN
fuelectenerg-900	251	38	resonators	resonator	NOUN
fuelectenerg-900	251	39	.	.	PUNCT
fuelectenerg-900	252	1	an	an	DET
fuelectenerg-900	252	2	example	example	NOUN
fuelectenerg-900	252	3	of	of	ADP
fuelectenerg-900	252	4	a	a	DET
fuelectenerg-900	252	5	commercial	commercial	ADJ
fuelectenerg-900	252	6	product	product	NOUN
fuelectenerg-900	252	7	is	be	AUX
fuelectenerg-900	252	8	agilent	agilent	PROPN
fuelectenerg-900	252	9	's	's	PART
fuelectenerg-900	252	10	fbar	fbar	NOUN
fuelectenerg-900	252	11	filter	filter	NOUN
fuelectenerg-900	252	12	from	from	ADP
fuelectenerg-900	252	13	2001	2001	NUM
fuelectenerg-900	252	14	.	.	PUNCT
fuelectenerg-900	253	1	this	this	PRON
fuelectenerg-900	253	2	is	be	AUX
fuelectenerg-900	253	3	the	the	DET
fuelectenerg-900	253	4	first	first	ADJ
fuelectenerg-900	253	5	rf	rf	ADJ
fuelectenerg-900	253	6	mems	mems	PROPN
fuelectenerg-900	253	7	component	component	NOUN
fuelectenerg-900	253	8	that	that	PRON
fuelectenerg-900	253	9	appeared	appear	VERB
fuelectenerg-900	253	10	on	on	ADP
fuelectenerg-900	253	11	the	the	DET
fuelectenerg-900	253	12	market	market	NOUN
fuelectenerg-900	253	13	.	.	PUNCT
fuelectenerg-900	254	1	fbar	fbar	NOUN
fuelectenerg-900	254	2	filters	filter	NOUN
fuelectenerg-900	254	3	have	have	VERB
fuelectenerg-900	254	4	better	well	ADJ
fuelectenerg-900	254	5	performance	performance	NOUN
fuelectenerg-900	254	6	(	(	PUNCT
fuelectenerg-900	254	7	a	a	DET
fuelectenerg-900	254	8	higher	high	ADJ
fuelectenerg-900	254	9	q	q	NOUN
fuelectenerg-900	254	10	factor	factor	NOUN
fuelectenerg-900	254	11	,	,	PUNCT
fuelectenerg-900	254	12	lower	low	ADJ
fuelectenerg-900	254	13	insertion	insertion	NOUN
fuelectenerg-900	254	14	loss	loss	NOUN
fuelectenerg-900	254	15	,	,	PUNCT
fuelectenerg-900	254	16	better	well	ADJ
fuelectenerg-900	254	17	selectivity	selectivity	NOUN
fuelectenerg-900	254	18	,	,	PUNCT
fuelectenerg-900	254	19	better	well	ADJ
fuelectenerg-900	254	20	temperature	temperature	NOUN
fuelectenerg-900	254	21	stability	stability	NOUN
fuelectenerg-900	254	22	,	,	PUNCT
fuelectenerg-900	254	23	the	the	DET
fuelectenerg-900	254	24	ability	ability	NOUN
fuelectenerg-900	254	25	to	to	PART
fuelectenerg-900	254	26	work	work	VERB
fuelectenerg-900	254	27	with	with	ADP
fuelectenerg-900	254	28	higher	high	ADJ
fuelectenerg-900	254	29	rf	rf	NOUN
fuelectenerg-900	254	30	powers	power	NOUN
fuelectenerg-900	254	31	greater	great	ADJ
fuelectenerg-900	254	32	than	than	ADP
fuelectenerg-900	254	33	1	1	NUM
fuelectenerg-900	254	34	w	w	NOUN
fuelectenerg-900	254	35	)	)	PUNCT
fuelectenerg-900	254	36	than	than	ADP
fuelectenerg-900	254	37	conventional	conventional	ADJ
fuelectenerg-900	254	38	saw	see	VERB
fuelectenerg-900	254	39	filters	filter	NOUN
fuelectenerg-900	254	40	at	at	ADP
fuelectenerg-900	254	41	frequencies	frequency	NOUN
fuelectenerg-900	254	42	around	around	ADP
fuelectenerg-900	254	43	2	2	NUM
fuelectenerg-900	254	44	ghz	ghz	NOUN
fuelectenerg-900	254	45	and	and	CCONJ
fuelectenerg-900	254	46	above	above	ADV
fuelectenerg-900	254	47	.	.	PUNCT
fuelectenerg-900	255	1	mems	mems	PROPN
fuelectenerg-900	255	2	baw	baw	PROPN
fuelectenerg-900	255	3	(	(	PUNCT
fuelectenerg-900	255	4	fbar	fbar	NOUN
fuelectenerg-900	255	5	)	)	PUNCT
fuelectenerg-900	255	6	resonators	resonator	NOUN
fuelectenerg-900	255	7	find	find	VERB
fuelectenerg-900	255	8	the	the	DET
fuelectenerg-900	255	9	main	main	ADJ
fuelectenerg-900	255	10	application	application	NOUN
fuelectenerg-900	255	11	in	in	ADP
fuelectenerg-900	255	12	mobile	mobile	ADJ
fuelectenerg-900	255	13	terminals	terminal	NOUN
fuelectenerg-900	255	14	,	,	PUNCT
fuelectenerg-900	255	15	where	where	SCONJ
fuelectenerg-900	255	16	they	they	PRON
fuelectenerg-900	255	17	have	have	AUX
fuelectenerg-900	255	18	replaced	replace	VERB
fuelectenerg-900	255	19	traditional	traditional	ADJ
fuelectenerg-900	255	20	duplexers	duplexer	NOUN
fuelectenerg-900	255	21	,	,	PUNCT
fuelectenerg-900	255	22	which	which	PRON
fuelectenerg-900	255	23	are	be	AUX
fuelectenerg-900	255	24	bulky	bulky	ADJ
fuelectenerg-900	255	25	non	non	ADJ
fuelectenerg-900	255	26	-	-	ADJ
fuelectenerg-900	255	27	integrated	integrated	ADJ
fuelectenerg-900	255	28	components	component	NOUN
fuelectenerg-900	255	29	.	.	PUNCT
fuelectenerg-900	256	1	they	they	PRON
fuelectenerg-900	256	2	are	be	AUX
fuelectenerg-900	256	3	also	also	ADV
fuelectenerg-900	256	4	used	use	VERB
fuelectenerg-900	256	5	in	in	ADP
fuelectenerg-900	256	6	bandpass	bandpass	NOUN
fuelectenerg-900	256	7	filters	filter	NOUN
fuelectenerg-900	256	8	,	,	PUNCT
fuelectenerg-900	256	9	which	which	PRON
fuelectenerg-900	256	10	are	be	AUX
fuelectenerg-900	256	11	traditionally	traditionally	ADV
fuelectenerg-900	256	12	realized	realize	VERB
fuelectenerg-900	256	13	using	use	VERB
fuelectenerg-900	256	14	conventional	conventional	ADJ
fuelectenerg-900	256	15	off	off	ADP
fuelectenerg-900	256	16	-	-	PUNCT
fuelectenerg-900	256	17	chip	chip	NOUN
fuelectenerg-900	256	18	saw	see	VERB
fuelectenerg-900	256	19	components	component	NOUN
fuelectenerg-900	256	20	of	of	ADP
fuelectenerg-900	256	21	larger	large	ADJ
fuelectenerg-900	256	22	dimensions	dimension	NOUN
fuelectenerg-900	256	23	.	.	PUNCT
fuelectenerg-900	257	1	for	for	ADP
fuelectenerg-900	257	2	example	example	NOUN
fuelectenerg-900	257	3	,	,	PUNCT
fuelectenerg-900	257	4	by	by	ADP
fuelectenerg-900	257	5	using	use	VERB
fuelectenerg-900	257	6	fbar	fbar	NOUN
fuelectenerg-900	257	7	components	component	NOUN
fuelectenerg-900	257	8	in	in	ADP
fuelectenerg-900	257	9	mobile	mobile	ADJ
fuelectenerg-900	257	10	terminals	terminal	NOUN
fuelectenerg-900	257	11	instead	instead	ADV
fuelectenerg-900	257	12	of	of	ADP
fuelectenerg-900	257	13	two	two	NUM
fuelectenerg-900	257	14	saw	see	VERB
fuelectenerg-900	257	15	filters	filter	NOUN
fuelectenerg-900	257	16	that	that	PRON
fuelectenerg-900	257	17	are	be	AUX
fuelectenerg-900	257	18	traditionally	traditionally	ADV
fuelectenerg-900	257	19	used	use	VERB
fuelectenerg-900	257	20	for	for	ADP
fuelectenerg-900	257	21	pcs	pc	NOUN
fuelectenerg-900	257	22	bands	band	NOUN
fuelectenerg-900	257	23	18501880	18501880	NUM
fuelectenerg-900	257	24	mhz	mhz	NOUN
fuelectenerg-900	257	25	and	and	CCONJ
fuelectenerg-900	257	26	1880	1880	NUM
fuelectenerg-900	257	27	-	-	SYM
fuelectenerg-900	257	28	1910	1910	NUM
fuelectenerg-900	257	29	mhz	mhz	NOUN
fuelectenerg-900	257	30	,	,	PUNCT
fuelectenerg-900	257	31	the	the	DET
fuelectenerg-900	257	32	area	area	NOUN
fuelectenerg-900	257	33	needed	need	VERB
fuelectenerg-900	257	34	for	for	ADP
fuelectenerg-900	257	35	the	the	DET
fuelectenerg-900	257	36	transmission	transmission	NOUN
fuelectenerg-900	257	37	filter	filter	NOUN
fuelectenerg-900	257	38	is	be	AUX
fuelectenerg-900	257	39	reduced	reduce	VERB
fuelectenerg-900	257	40	by	by	ADP
fuelectenerg-900	257	41	90	90	NUM
fuelectenerg-900	257	42	%	%	NOUN
fuelectenerg-900	257	43	,	,	PUNCT
fuelectenerg-900	257	44	and	and	CCONJ
fuelectenerg-900	257	45	so	so	ADV
fuelectenerg-900	257	46	is	be	AUX
fuelectenerg-900	257	47	the	the	DET
fuelectenerg-900	257	48	realization	realization	NOUN
fuelectenerg-900	257	49	cost	cost	NOUN
fuelectenerg-900	257	50	.	.	PUNCT
fuelectenerg-900	258	1	fbar	fbar	NOUN
fuelectenerg-900	258	2	duplexers	duplexer	NOUN
fuelectenerg-900	258	3	and	and	CCONJ
fuelectenerg-900	258	4	filters	filter	NOUN
fuelectenerg-900	258	5	are	be	AUX
fuelectenerg-900	258	6	currently	currently	ADV
fuelectenerg-900	258	7	the	the	DET
fuelectenerg-900	258	8	only	only	ADJ
fuelectenerg-900	258	9	novel	novel	NOUN
fuelectenerg-900	258	10	pe	pe	ADP
fuelectenerg-900	258	11	frequency	frequency	NOUN
fuelectenerg-900	258	12	selective	selective	ADJ
fuelectenerg-900	258	13	components	component	NOUN
fuelectenerg-900	258	14	that	that	PRON
fuelectenerg-900	258	15	meet	meet	VERB
fuelectenerg-900	258	16	all	all	DET
fuelectenerg-900	258	17	the	the	DET
fuelectenerg-900	258	18	required	require	VERB
fuelectenerg-900	258	19	specifications	specification	NOUN
fuelectenerg-900	258	20	of	of	ADP
fuelectenerg-900	258	21	wireless	wireless	ADJ
fuelectenerg-900	258	22	standards	standard	NOUN
fuelectenerg-900	258	23	and	and	CCONJ
fuelectenerg-900	258	24	enable	enable	VERB
fuelectenerg-900	258	25	the	the	DET
fuelectenerg-900	258	26	miniaturization	miniaturization	NOUN
fuelectenerg-900	258	27	of	of	ADP
fuelectenerg-900	258	28	the	the	DET
fuelectenerg-900	258	29	rf	rf	ADJ
fuelectenerg-900	258	30	part	part	NOUN
fuelectenerg-900	258	31	of	of	ADP
fuelectenerg-900	258	32	the	the	DET
fuelectenerg-900	258	33	transceivers	transceiver	NOUN
fuelectenerg-900	258	34	of	of	ADP
fuelectenerg-900	258	35	multiband	multiband	NOUN
fuelectenerg-900	258	36	multimode	multimode	NOUN
fuelectenerg-900	258	37	mobile	mobile	ADJ
fuelectenerg-900	258	38	terminals	terminal	NOUN
fuelectenerg-900	258	39	.	.	PUNCT
fuelectenerg-900	259	1	the	the	DET
fuelectenerg-900	259	2	aln	aln	PROPN
fuelectenerg-900	259	3	fbar	fbar	PROPN
fuelectenerg-900	259	4	resonator	resonator	NOUN
fuelectenerg-900	259	5	manufactured	manufacture	VERB
fuelectenerg-900	259	6	by	by	ADP
fuelectenerg-900	259	7	avago	avago	PROPN
fuelectenerg-900	259	8	technologies	technology	NOUN
fuelectenerg-900	259	9	is	be	AUX
fuelectenerg-900	259	10	the	the	DET
fuelectenerg-900	259	11	most	most	ADV
fuelectenerg-900	259	12	successful	successful	ADJ
fuelectenerg-900	259	13	mems	mem	NOUN
fuelectenerg-900	259	14	resonator	resonator	NOUN
fuelectenerg-900	259	15	in	in	ADP
fuelectenerg-900	259	16	the	the	DET
fuelectenerg-900	259	17	past	past	ADJ
fuelectenerg-900	259	18	decade	decade	NOUN
fuelectenerg-900	259	19	[	[	X
fuelectenerg-900	259	20	8	8	NUM
fuelectenerg-900	259	21	]	]	PUNCT
fuelectenerg-900	259	22	.	.	PUNCT
fuelectenerg-900	260	1	capacitive	capacitive	ADJ
fuelectenerg-900	260	2	mems	mem	NOUN
fuelectenerg-900	260	3	resonators	resonator	NOUN
fuelectenerg-900	260	4	that	that	PRON
fuelectenerg-900	260	5	can	can	AUX
fuelectenerg-900	260	6	be	be	AUX
fuelectenerg-900	260	7	used	use	VERB
fuelectenerg-900	260	8	instead	instead	ADV
fuelectenerg-900	260	9	of	of	ADP
fuelectenerg-900	260	10	quartz	quartz	NOUN
fuelectenerg-900	260	11	resonators	resonator	NOUN
fuelectenerg-900	260	12	have	have	AUX
fuelectenerg-900	260	13	also	also	ADV
fuelectenerg-900	260	14	become	become	VERB
fuelectenerg-900	260	15	commercially	commercially	ADV
fuelectenerg-900	260	16	available	available	ADJ
fuelectenerg-900	260	17	(	(	PUNCT
fuelectenerg-900	260	18	discera	discera	NOUN
fuelectenerg-900	260	19	,	,	PUNCT
fuelectenerg-900	260	20	sitime	sitime	NOUN
fuelectenerg-900	260	21	)	)	PUNCT
fuelectenerg-900	260	22	.	.	PUNCT
fuelectenerg-900	261	1	the	the	DET
fuelectenerg-900	261	2	first	first	ADJ
fuelectenerg-900	261	3	silicon	silicon	NOUN
fuelectenerg-900	261	4	mems	mem	NOUN
fuelectenerg-900	261	5	oscillator	oscillator	NOUN
fuelectenerg-900	261	6	manufactured	manufacture	VERB
fuelectenerg-900	261	7	by	by	ADP
fuelectenerg-900	261	8	discera	discera	NOUN
fuelectenerg-900	261	9	appeared	appear	VERB
fuelectenerg-900	261	10	in	in	ADP
fuelectenerg-900	261	11	2003	2003	NUM
fuelectenerg-900	261	12	.	.	PUNCT
fuelectenerg-900	262	1	its	its	PRON
fuelectenerg-900	262	2	resonant	resonant	ADJ
fuelectenerg-900	262	3	structure	structure	NOUN
fuelectenerg-900	262	4	is	be	AUX
fuelectenerg-900	262	5	in	in	ADP
fuelectenerg-900	262	6	the	the	DET
fuelectenerg-900	262	7	form	form	NOUN
fuelectenerg-900	262	8	of	of	ADP
fuelectenerg-900	262	9	a	a	DET
fuelectenerg-900	262	10	cantilever	cantilever	NOUN
fuelectenerg-900	262	11	,	,	PUNCT
fuelectenerg-900	262	12	with	with	ADP
fuelectenerg-900	262	13	dimensions	dimension	NOUN
fuelectenerg-900	262	14	of	of	ADP
fuelectenerg-900	262	15	30	30	NUM
fuelectenerg-900	262	16			NOUN
fuelectenerg-900	262	17	8	8	NUM
fuelectenerg-900	262	18	μm	μm	NUM
fuelectenerg-900	262	19	2	2	NUM
fuelectenerg-900	262	20	and	and	CCONJ
fuelectenerg-900	262	21	a	a	DET
fuelectenerg-900	262	22	resonance	resonance	NOUN
fuelectenerg-900	262	23	frequency	frequency	NOUN
fuelectenerg-900	262	24	of	of	ADP
fuelectenerg-900	262	25	19.2	19.2	NUM
fuelectenerg-900	262	26	mhz	mhz	NOUN
fuelectenerg-900	262	27	.	.	PUNCT
fuelectenerg-900	263	1	the	the	DET
fuelectenerg-900	263	2	following	following	ADJ
fuelectenerg-900	263	3	year	year	NOUN
fuelectenerg-900	263	4	,	,	PUNCT
fuelectenerg-900	263	5	the	the	DET
fuelectenerg-900	263	6	same	same	ADJ
fuelectenerg-900	263	7	manufacturer	manufacturer	NOUN
fuelectenerg-900	263	8	presented	present	VERB
fuelectenerg-900	263	9	the	the	DET
fuelectenerg-900	263	10	first	first	ADJ
fuelectenerg-900	263	11	integrated	integrate	VERB
fuelectenerg-900	263	12	mems	mem	NOUN
fuelectenerg-900	263	13	tunable	tunable	NOUN
fuelectenerg-900	263	14	oscillator	oscillator	NOUN
fuelectenerg-900	263	15	with	with	ADP
fuelectenerg-900	263	16	a	a	DET
fuelectenerg-900	263	17	nominal	nominal	ADJ
fuelectenerg-900	263	18	frequency	frequency	NOUN
fuelectenerg-900	263	19	of	of	ADP
fuelectenerg-900	263	20	1.6	1.6	NUM
fuelectenerg-900	263	21	ghz	ghz	NOUN
fuelectenerg-900	263	22	,	,	PUNCT
fuelectenerg-900	263	23	intended	intend	VERB
fuelectenerg-900	263	24	to	to	PART
fuelectenerg-900	263	25	be	be	AUX
fuelectenerg-900	263	26	used	use	VERB
fuelectenerg-900	263	27	as	as	ADP
fuelectenerg-900	263	28	a	a	DET
fuelectenerg-900	263	29	voltage	voltage	NOUN
fuelectenerg-900	263	30	controlled	control	VERB
fuelectenerg-900	263	31	oscillator	oscillator	NOUN
fuelectenerg-900	263	32	of	of	ADP
fuelectenerg-900	263	33	the	the	DET
fuelectenerg-900	263	34	local	local	ADJ
fuelectenerg-900	263	35	oscillator	oscillator	NOUN
fuelectenerg-900	263	36	in	in	ADP
fuelectenerg-900	263	37	transceivers	transceiver	NOUN
fuelectenerg-900	263	38	of	of	ADP
fuelectenerg-900	263	39	mobile	mobile	ADJ
fuelectenerg-900	263	40	terminals	terminal	NOUN
fuelectenerg-900	263	41	;	;	PUNCT
fuelectenerg-900	263	42	however	however	ADV
fuelectenerg-900	263	43	,	,	PUNCT
fuelectenerg-900	263	44	it	it	PRON
fuelectenerg-900	263	45	is	be	AUX
fuelectenerg-900	263	46	not	not	PART
fuelectenerg-900	263	47	commercially	commercially	ADV
fuelectenerg-900	263	48	available	available	ADJ
fuelectenerg-900	263	49	.	.	PUNCT
fuelectenerg-900	264	1	in	in	ADP
fuelectenerg-900	264	2	2006	2006	NUM
fuelectenerg-900	264	3	,	,	PUNCT
fuelectenerg-900	264	4	the	the	DET
fuelectenerg-900	264	5	first	first	ADJ
fuelectenerg-900	264	6	sitime	sitime	PROPN
fuelectenerg-900	264	7	mems	mem	NOUN
fuelectenerg-900	264	8	oscillators	oscillator	NOUN
fuelectenerg-900	264	9	with	with	ADP
fuelectenerg-900	264	10	a	a	DET
fuelectenerg-900	264	11	resonant	resonant	ADJ
fuelectenerg-900	264	12	structure	structure	NOUN
fuelectenerg-900	264	13	in	in	ADP
fuelectenerg-900	264	14	the	the	DET
fuelectenerg-900	264	15	shape	shape	NOUN
fuelectenerg-900	264	16	of	of	ADP
fuelectenerg-900	264	17	a	a	DET
fuelectenerg-900	264	18	square	square	ADJ
fuelectenerg-900	264	19	ring	ring	NOUN
fuelectenerg-900	264	20	oscillating	oscillating	NOUN
fuelectenerg-900	264	21	in	in	ADP
fuelectenerg-900	264	22	the	the	DET
fuelectenerg-900	264	23	flexural	flexural	ADJ
fuelectenerg-900	264	24	mode	mode	NOUN
fuelectenerg-900	264	25	appeared	appear	VERB
fuelectenerg-900	264	26	in	in	ADP
fuelectenerg-900	264	27	the	the	DET
fuelectenerg-900	264	28	market	market	NOUN
fuelectenerg-900	264	29	.	.	PUNCT
fuelectenerg-900	265	1	commercially	commercially	ADV
fuelectenerg-900	265	2	available	available	ADJ
fuelectenerg-900	265	3	is	be	AUX
fuelectenerg-900	265	4	also	also	ADV
fuelectenerg-900	265	5	a	a	DET
fuelectenerg-900	265	6	sitime	sitime	ADJ
fuelectenerg-900	265	7	resonator	resonator	NOUN
fuelectenerg-900	265	8	with	with	ADP
fuelectenerg-900	265	9	a	a	DET
fuelectenerg-900	265	10	resonace	resonace	NOUN
fuelectenerg-900	265	11	frequency	frequency	NOUN
fuelectenerg-900	265	12	of	of	ADP
fuelectenerg-900	265	13	5	5	NUM
fuelectenerg-900	265	14	mhz	mhz	NOUN
fuelectenerg-900	265	15	(	(	PUNCT
fuelectenerg-900	265	16	q=80000	q=80000	ADJ
fuelectenerg-900	265	17	,	,	PUNCT
fuelectenerg-900	265	18	vp=1.8	vp=1.8	PROPN
fuelectenerg-900	265	19	-	-	PUNCT
fuelectenerg-900	265	20	4.6	4.6	NUM
fuelectenerg-900	265	21	v	v	NOUN
fuelectenerg-900	265	22	,	,	PUNCT
fuelectenerg-900	265	23	long	long	ADJ
fuelectenerg-900	265	24	-	-	PUNCT
fuelectenerg-900	265	25	term	term	NOUN
fuelectenerg-900	265	26	frequency	frequency	NOUN
fuelectenerg-900	265	27	stability	stability	NOUN
fuelectenerg-900	265	28	0.5	0.5	NUM
fuelectenerg-900	265	29	ppm	ppm	NOUN
fuelectenerg-900	265	30	/	/	SYM
fuelectenerg-900	265	31	year	year	NOUN
fuelectenerg-900	265	32	,	,	PUNCT
fuelectenerg-900	265	33	800	800	NUM
fuelectenerg-900	265	34			NOUN
fuelectenerg-900	265	35	600	600	NUM
fuelectenerg-900	265	36			NOUN
fuelectenerg-900	265	37	150	150	NUM
fuelectenerg-900	265	38	μm	μm	NOUN
fuelectenerg-900	265	39	3	3	NUM
fuelectenerg-900	265	40	in	in	ADP
fuelectenerg-900	265	41	size	size	NOUN
fuelectenerg-900	265	42	)	)	PUNCT
fuelectenerg-900	265	43	,	,	PUNCT
fuelectenerg-900	265	44	fabricated	fabricate	VERB
fuelectenerg-900	265	45	on	on	ADP
fuelectenerg-900	265	46	si	si	PROPN
fuelectenerg-900	265	47	.	.	PROPN
fuelectenerg-900	265	48	a	a	DET
fuelectenerg-900	265	49	si	si	PROPN
fuelectenerg-900	265	50	358	358	NUM
fuelectenerg-900	265	51	i.	i.	NOUN
fuelectenerg-900	265	52	jokić	jokić	PROPN
fuelectenerg-900	265	53	,	,	PUNCT
fuelectenerg-900	265	54	m.	m.	NOUN
fuelectenerg-900	265	55	frantlović	frantlović	NOUN
fuelectenerg-900	265	56	,	,	PUNCT
fuelectenerg-900	265	57	z.	z.	PROPN
fuelectenerg-900	265	58	djurić	djurić	PROPN
fuelectenerg-900	265	59	,	,	PUNCT
fuelectenerg-900	265	60	m.	m.	NOUN
fuelectenerg-900	265	61	l.	l.	PROPN
fuelectenerg-900	265	62	dukić	dukić	PROPN
fuelectenerg-900	265	63	mems	mems	PROPN
fuelectenerg-900	265	64	chip	chip	NOUN
fuelectenerg-900	265	65	is	be	AUX
fuelectenerg-900	265	66	placed	place	VERB
fuelectenerg-900	265	67	on	on	ADP
fuelectenerg-900	265	68	a	a	DET
fuelectenerg-900	265	69	cmos	cmos	NOUN
fuelectenerg-900	265	70	chip	chip	NOUN
fuelectenerg-900	265	71	that	that	PRON
fuelectenerg-900	265	72	contains	contain	VERB
fuelectenerg-900	265	73	amplifier	amplifier	ADJ
fuelectenerg-900	265	74	circuits	circuit	NOUN
fuelectenerg-900	265	75	,	,	PUNCT
fuelectenerg-900	265	76	circuits	circuit	NOUN
fuelectenerg-900	265	77	for	for	ADP
fuelectenerg-900	265	78	temperature	temperature	NOUN
fuelectenerg-900	265	79	compensation	compensation	NOUN
fuelectenerg-900	265	80	and	and	CCONJ
fuelectenerg-900	265	81	programmable	programmable	ADJ
fuelectenerg-900	265	82	memory	memory	NOUN
fuelectenerg-900	265	83	.	.	PUNCT
fuelectenerg-900	266	1	the	the	DET
fuelectenerg-900	266	2	dimensions	dimension	NOUN
fuelectenerg-900	266	3	of	of	ADP
fuelectenerg-900	266	4	the	the	DET
fuelectenerg-900	266	5	packaging	packaging	NOUN
fuelectenerg-900	266	6	that	that	PRON
fuelectenerg-900	266	7	contains	contain	VERB
fuelectenerg-900	266	8	both	both	DET
fuelectenerg-900	266	9	chips	chip	NOUN
fuelectenerg-900	266	10	are	be	AUX
fuelectenerg-900	266	11	2	2	NUM
fuelectenerg-900	266	12	×	×	NOUN
fuelectenerg-900	266	13	1.6	1.6	NUM
fuelectenerg-900	266	14	×	×	NOUN
fuelectenerg-900	266	15	0.25	0.25	NUM
fuelectenerg-900	266	16	mm	mm	NOUN
fuelectenerg-900	266	17	3	3	NUM
fuelectenerg-900	267	1	and	and	CCONJ
fuelectenerg-900	267	2	this	this	PRON
fuelectenerg-900	267	3	is	be	AUX
fuelectenerg-900	267	4	currently	currently	ADV
fuelectenerg-900	267	5	the	the	DET
fuelectenerg-900	267	6	smallest	small	ADJ
fuelectenerg-900	267	7	programmable	programmable	ADJ
fuelectenerg-900	267	8	oscillator	oscillator	NOUN
fuelectenerg-900	267	9	.	.	PUNCT
fuelectenerg-900	268	1	and	and	CCONJ
fuelectenerg-900	268	2	what	what	PRON
fuelectenerg-900	268	3	are	be	AUX
fuelectenerg-900	268	4	the	the	DET
fuelectenerg-900	268	5	future	future	ADJ
fuelectenerg-900	268	6	needs	need	NOUN
fuelectenerg-900	268	7	?	?	PUNCT
fuelectenerg-900	269	1	the	the	DET
fuelectenerg-900	269	2	development	development	NOUN
fuelectenerg-900	269	3	of	of	ADP
fuelectenerg-900	269	4	mems	mems	ADJ
fuelectenerg-900	269	5	resonators	resonator	NOUN
fuelectenerg-900	269	6	with	with	ADP
fuelectenerg-900	269	7	f0~1	f0~1	NOUN
fuelectenerg-900	269	8	ghz	ghz	NOUN
fuelectenerg-900	269	9	and	and	CCONJ
fuelectenerg-900	269	10	q>10	q>10	NUM
fuelectenerg-900	269	11	4	4	NUM
fuelectenerg-900	269	12	would	would	AUX
fuelectenerg-900	269	13	enable	enable	VERB
fuelectenerg-900	269	14	implementation	implementation	NOUN
fuelectenerg-900	269	15	of	of	ADP
fuelectenerg-900	269	16	new	new	ADJ
fuelectenerg-900	269	17	and	and	CCONJ
fuelectenerg-900	269	18	compact	compact	ADJ
fuelectenerg-900	269	19	multiband	multiband	NOUN
fuelectenerg-900	269	20	multistandard	multistandard	NOUN
fuelectenerg-900	269	21	transceiver	transceiver	NOUN
fuelectenerg-900	269	22	architectures	architecture	NOUN
fuelectenerg-900	269	23	(	(	PUNCT
fuelectenerg-900	269	24	e.g.	e.g.	ADV
fuelectenerg-900	269	25	direct	direct	ADJ
fuelectenerg-900	269	26	channel	channel	NOUN
fuelectenerg-900	269	27	selection	selection	NOUN
fuelectenerg-900	269	28	at	at	ADP
fuelectenerg-900	269	29	the	the	DET
fuelectenerg-900	269	30	rf	rf	ADJ
fuelectenerg-900	269	31	stage	stage	NOUN
fuelectenerg-900	269	32	)	)	PUNCT
fuelectenerg-900	270	1	[	[	X
fuelectenerg-900	270	2	65	65	NUM
fuelectenerg-900	270	3	]	]	PUNCT
fuelectenerg-900	270	4	.	.	PUNCT
fuelectenerg-900	271	1	frequency	frequency	NOUN
fuelectenerg-900	271	2	references	reference	NOUN
fuelectenerg-900	271	3	in	in	ADP
fuelectenerg-900	271	4	the	the	DET
fuelectenerg-900	271	5	ghz	ghz	NOUN
fuelectenerg-900	271	6	range	range	NOUN
fuelectenerg-900	271	7	are	be	AUX
fuelectenerg-900	271	8	also	also	ADV
fuelectenerg-900	271	9	desirable	desirable	ADJ
fuelectenerg-900	271	10	in	in	ADP
fuelectenerg-900	271	11	future	future	ADJ
fuelectenerg-900	271	12	wireless	wireless	ADJ
fuelectenerg-900	271	13	communications	communication	NOUN
fuelectenerg-900	271	14	and	and	CCONJ
fuelectenerg-900	271	15	other	other	ADJ
fuelectenerg-900	271	16	high	high	ADJ
fuelectenerg-900	271	17	-	-	PUNCT
fuelectenerg-900	271	18	speed	speed	NOUN
fuelectenerg-900	271	19	electronic	electronic	ADJ
fuelectenerg-900	271	20	systems	system	NOUN
fuelectenerg-900	271	21	.	.	PUNCT
fuelectenerg-900	272	1	although	although	SCONJ
fuelectenerg-900	272	2	the	the	DET
fuelectenerg-900	272	3	possibility	possibility	NOUN
fuelectenerg-900	272	4	of	of	ADP
fuelectenerg-900	272	5	fabrication	fabrication	NOUN
fuelectenerg-900	272	6	of	of	ADP
fuelectenerg-900	272	7	monolithically	monolithically	ADV
fuelectenerg-900	272	8	integrated	integrate	VERB
fuelectenerg-900	272	9	mems	mem	NOUN
fuelectenerg-900	272	10	resonator	resonator	NOUN
fuelectenerg-900	272	11	arrays	array	NOUN
fuelectenerg-900	272	12	of	of	ADP
fuelectenerg-900	272	13	different	different	ADJ
fuelectenerg-900	272	14	resonance	resonance	NOUN
fuelectenerg-900	272	15	frequencies	frequency	NOUN
fuelectenerg-900	272	16	is	be	AUX
fuelectenerg-900	272	17	very	very	ADV
fuelectenerg-900	272	18	significant	significant	ADJ
fuelectenerg-900	272	19	for	for	ADP
fuelectenerg-900	272	20	multiband	multiband	NOUN
fuelectenerg-900	272	21	transceivers	transceiver	NOUN
fuelectenerg-900	272	22	,	,	PUNCT
fuelectenerg-900	272	23	enabling	enable	VERB
fuelectenerg-900	272	24	versatility	versatility	NOUN
fuelectenerg-900	272	25	and	and	CCONJ
fuelectenerg-900	272	26	reconfigurability	reconfigurability	NOUN
fuelectenerg-900	272	27	on	on	ADP
fuelectenerg-900	272	28	a	a	DET
fuelectenerg-900	272	29	small	small	ADJ
fuelectenerg-900	272	30	surface	surface	NOUN
fuelectenerg-900	272	31	,	,	PUNCT
fuelectenerg-900	272	32	the	the	DET
fuelectenerg-900	272	33	ultimate	ultimate	ADJ
fuelectenerg-900	272	34	objective	objective	NOUN
fuelectenerg-900	272	35	in	in	ADP
fuelectenerg-900	272	36	that	that	DET
fuelectenerg-900	272	37	sense	sense	NOUN
fuelectenerg-900	272	38	are	be	AUX
fuelectenerg-900	272	39	the	the	DET
fuelectenerg-900	272	40	resonators	resonator	NOUN
fuelectenerg-900	272	41	whose	whose	DET
fuelectenerg-900	272	42	parameters	parameter	NOUN
fuelectenerg-900	272	43	are	be	AUX
fuelectenerg-900	272	44	adjustable	adjustable	ADJ
fuelectenerg-900	272	45	in	in	ADP
fuelectenerg-900	272	46	a	a	DET
fuelectenerg-900	272	47	wide	wide	ADJ
fuelectenerg-900	272	48	range	range	NOUN
fuelectenerg-900	272	49	,	,	PUNCT
fuelectenerg-900	272	50	resulting	result	VERB
fuelectenerg-900	272	51	in	in	ADP
fuelectenerg-900	272	52	a	a	DET
fuelectenerg-900	272	53	significant	significant	ADJ
fuelectenerg-900	272	54	reduction	reduction	NOUN
fuelectenerg-900	272	55	in	in	ADP
fuelectenerg-900	272	56	the	the	DET
fuelectenerg-900	272	57	number	number	NOUN
fuelectenerg-900	272	58	of	of	ADP
fuelectenerg-900	272	59	necessary	necessary	ADJ
fuelectenerg-900	272	60	components	component	NOUN
fuelectenerg-900	272	61	.	.	PUNCT
fuelectenerg-900	273	1	therefore	therefore	ADV
fuelectenerg-900	273	2	,	,	PUNCT
fuelectenerg-900	273	3	high	high	ADJ
fuelectenerg-900	273	4	-	-	PUNCT
fuelectenerg-900	273	5	q	q	NOUN
fuelectenerg-900	273	6	resonators	resonator	NOUN
fuelectenerg-900	273	7	oscillating	oscillate	VERB
fuelectenerg-900	273	8	at	at	ADP
fuelectenerg-900	273	9	ghz	ghz	NOUN
fuelectenerg-900	273	10	frequencies	frequency	NOUN
fuelectenerg-900	273	11	and	and	CCONJ
fuelectenerg-900	273	12	tunability	tunability	NOUN
fuelectenerg-900	273	13	of	of	ADP
fuelectenerg-900	273	14	the	the	DET
fuelectenerg-900	273	15	resonance	resonance	NOUN
fuelectenerg-900	273	16	frequency	frequency	NOUN
fuelectenerg-900	273	17	are	be	AUX
fuelectenerg-900	273	18	highly	highly	ADV
fuelectenerg-900	273	19	needed	need	VERB
fuelectenerg-900	273	20	in	in	ADP
fuelectenerg-900	273	21	future	future	ADJ
fuelectenerg-900	273	22	systems	system	NOUN
fuelectenerg-900	273	23	.	.	PUNCT
fuelectenerg-900	274	1	in	in	ADP
fuelectenerg-900	274	2	the	the	DET
fuelectenerg-900	274	3	next	next	ADJ
fuelectenerg-900	274	4	subsection	subsection	NOUN
fuelectenerg-900	274	5	the	the	DET
fuelectenerg-900	274	6	means	mean	NOUN
fuelectenerg-900	274	7	for	for	ADP
fuelectenerg-900	274	8	achieving	achieve	VERB
fuelectenerg-900	274	9	these	these	DET
fuelectenerg-900	274	10	goals	goal	NOUN
fuelectenerg-900	274	11	will	will	AUX
fuelectenerg-900	274	12	be	be	AUX
fuelectenerg-900	274	13	considered	consider	VERB
fuelectenerg-900	274	14	.	.	PUNCT
fuelectenerg-900	275	1	2.2	2.2	NUM
fuelectenerg-900	275	2	.	.	PUNCT
fuelectenerg-900	275	3	achieving	achieve	VERB
fuelectenerg-900	275	4	ghz	ghz	NOUN
fuelectenerg-900	275	5	resonance	resonance	NOUN
fuelectenerg-900	275	6	frequencies	frequency	NOUN
fuelectenerg-900	275	7	and	and	CCONJ
fuelectenerg-900	275	8	the	the	DET
fuelectenerg-900	275	9	resonance	resonance	NOUN
fuelectenerg-900	275	10	frequency	frequency	NOUN
fuelectenerg-900	275	11	tuning	tuning	NOUN
fuelectenerg-900	275	12	in	in	ADP
fuelectenerg-900	275	13	order	order	NOUN
fuelectenerg-900	275	14	to	to	PART
fuelectenerg-900	275	15	achieve	achieve	VERB
fuelectenerg-900	275	16	the	the	DET
fuelectenerg-900	275	17	resonance	resonance	NOUN
fuelectenerg-900	275	18	frequency	frequency	NOUN
fuelectenerg-900	275	19	of	of	ADP
fuelectenerg-900	275	20	a	a	DET
fuelectenerg-900	275	21	mechanical	mechanical	ADJ
fuelectenerg-900	275	22	structure	structure	NOUN
fuelectenerg-900	275	23	in	in	ADP
fuelectenerg-900	275	24	ghz	ghz	NOUN
fuelectenerg-900	275	25	range	range	NOUN
fuelectenerg-900	275	26	one	one	NUM
fuelectenerg-900	275	27	has	have	VERB
fuelectenerg-900	275	28	to	to	PART
fuelectenerg-900	275	29	choose	choose	VERB
fuelectenerg-900	275	30	appropriate	appropriate	ADJ
fuelectenerg-900	275	31	geometry	geometry	NOUN
fuelectenerg-900	275	32	,	,	PUNCT
fuelectenerg-900	275	33	dimensions	dimension	NOUN
fuelectenerg-900	275	34	and	and	CCONJ
fuelectenerg-900	275	35	the	the	DET
fuelectenerg-900	275	36	material	material	NOUN
fuelectenerg-900	275	37	of	of	ADP
fuelectenerg-900	275	38	the	the	DET
fuelectenerg-900	275	39	structure	structure	NOUN
fuelectenerg-900	275	40	.	.	PUNCT
fuelectenerg-900	276	1	the	the	DET
fuelectenerg-900	276	2	analysis	analysis	NOUN
fuelectenerg-900	276	3	will	will	AUX
fuelectenerg-900	276	4	be	be	AUX
fuelectenerg-900	276	5	performed	perform	VERB
fuelectenerg-900	276	6	for	for	ADP
fuelectenerg-900	276	7	a	a	DET
fuelectenerg-900	276	8	doubly	doubly	ADV
fuelectenerg-900	276	9	clamped	clamp	VERB
fuelectenerg-900	276	10	beam	beam	NOUN
fuelectenerg-900	276	11	resonator	resonator	NOUN
fuelectenerg-900	276	12	,	,	PUNCT
fuelectenerg-900	276	13	since	since	SCONJ
fuelectenerg-900	276	14	it	it	PRON
fuelectenerg-900	276	15	is	be	AUX
fuelectenerg-900	276	16	commonly	commonly	ADV
fuelectenerg-900	276	17	used	use	VERB
fuelectenerg-900	276	18	as	as	ADP
fuelectenerg-900	276	19	a	a	DET
fuelectenerg-900	276	20	model	model	NOUN
fuelectenerg-900	276	21	structure	structure	NOUN
fuelectenerg-900	276	22	in	in	ADP
fuelectenerg-900	276	23	theoretic	theoretic	ADJ
fuelectenerg-900	276	24	considerations	consideration	NOUN
fuelectenerg-900	276	25	.	.	PUNCT
fuelectenerg-900	277	1	from	from	ADP
fuelectenerg-900	277	2	the	the	DET
fuelectenerg-900	277	3	expression	expression	NOUN
fuelectenerg-900	277	4	for	for	ADP
fuelectenerg-900	277	5	the	the	DET
fuelectenerg-900	277	6	mechanical	mechanical	ADJ
fuelectenerg-900	277	7	resonance	resonance	NOUN
fuelectenerg-900	277	8	frequency	frequency	NOUN
fuelectenerg-900	277	9	of	of	ADP
fuelectenerg-900	277	10	the	the	DET
fuelectenerg-900	277	11	clamped	clamp	VERB
fuelectenerg-900	277	12	-	-	PUNCT
fuelectenerg-900	277	13	clamped	clamp	VERB
fuelectenerg-900	277	14	beam	beam	NOUN
fuelectenerg-900	277	15	oscillating	oscillating	NOUN
fuelectenerg-900	277	16	in	in	ADP
fuelectenerg-900	277	17	the	the	DET
fuelectenerg-900	277	18	first	first	ADJ
fuelectenerg-900	277	19	flexural	flexural	ADJ
fuelectenerg-900	277	20	mode	mode	NOUN
fuelectenerg-900	277	21	,	,	PUNCT
fuelectenerg-900	277	22	f0=1.03(h	f0=1.03(h	ADJ
fuelectenerg-900	277	23	/	/	SYM
fuelectenerg-900	277	24	l	l	NOUN
fuelectenerg-900	277	25	2	2	NUM
fuelectenerg-900	277	26	)	)	PUNCT
fuelectenerg-900	277	27	(	(	PUNCT
fuelectenerg-900	277	28	e	e	X
fuelectenerg-900	277	29	/	/	SYM
fuelectenerg-900	277	30	ρ	ρ	NOUN
fuelectenerg-900	277	31	)	)	PUNCT
fuelectenerg-900	277	32	1/2	1/2	NUM
fuelectenerg-900	277	33	,	,	PUNCT
fuelectenerg-900	277	34	it	it	PRON
fuelectenerg-900	277	35	is	be	AUX
fuelectenerg-900	277	36	obvious	obvious	ADJ
fuelectenerg-900	277	37	that	that	SCONJ
fuelectenerg-900	277	38	the	the	DET
fuelectenerg-900	277	39	resonance	resonance	NOUN
fuelectenerg-900	277	40	frequency	frequency	NOUN
fuelectenerg-900	277	41	will	will	AUX
fuelectenerg-900	277	42	be	be	AUX
fuelectenerg-900	277	43	higher	high	ADJ
fuelectenerg-900	277	44	if	if	SCONJ
fuelectenerg-900	277	45	a	a	DET
fuelectenerg-900	277	46	structure	structure	NOUN
fuelectenerg-900	277	47	is	be	AUX
fuelectenerg-900	277	48	made	make	VERB
fuelectenerg-900	277	49	of	of	ADP
fuelectenerg-900	277	50	a	a	DET
fuelectenerg-900	277	51	material	material	NOUN
fuelectenerg-900	277	52	with	with	ADP
fuelectenerg-900	277	53	a	a	DET
fuelectenerg-900	277	54	high	high	ADJ
fuelectenerg-900	277	55	e	e	NOUN
fuelectenerg-900	277	56	/	/	SYM
fuelectenerg-900	277	57	ρ	ρ	PROPN
fuelectenerg-900	277	58	ratio	ratio	NOUN
fuelectenerg-900	277	59	(	(	PUNCT
fuelectenerg-900	277	60	e	e	NOUN
fuelectenerg-900	277	61	is	be	AUX
fuelectenerg-900	277	62	the	the	DET
fuelectenerg-900	277	63	material	material	NOUN
fuelectenerg-900	277	64	's	's	PART
fuelectenerg-900	277	65	young	young	ADJ
fuelectenerg-900	277	66	modulus	modulus	NOUN
fuelectenerg-900	277	67	,	,	PUNCT
fuelectenerg-900	277	68	ρ	ρ	PROPN
fuelectenerg-900	277	69	is	be	AUX
fuelectenerg-900	277	70	its	its	PRON
fuelectenerg-900	277	71	density	density	NOUN
fuelectenerg-900	277	72	)	)	PUNCT
fuelectenerg-900	277	73	and	and	CCONJ
fuelectenerg-900	277	74	also	also	ADV
fuelectenerg-900	277	75	if	if	SCONJ
fuelectenerg-900	277	76	the	the	DET
fuelectenerg-900	277	77	geometric	geometric	ADJ
fuelectenerg-900	277	78	parameter	parameter	NOUN
fuelectenerg-900	277	79	h	h	NOUN
fuelectenerg-900	277	80	/	/	SYM
fuelectenerg-900	277	81	l	l	NOUN
fuelectenerg-900	277	82	2	2	NUM
fuelectenerg-900	277	83	(	(	PUNCT
fuelectenerg-900	277	84	h	h	NOUN
fuelectenerg-900	277	85	is	be	AUX
fuelectenerg-900	277	86	the	the	DET
fuelectenerg-900	277	87	beam	beam	NOUN
fuelectenerg-900	277	88	thickness	thickness	NOUN
fuelectenerg-900	277	89	,	,	PUNCT
fuelectenerg-900	277	90	and	and	CCONJ
fuelectenerg-900	277	91	l	l	NOUN
fuelectenerg-900	277	92	is	be	AUX
fuelectenerg-900	277	93	its	its	PRON
fuelectenerg-900	277	94	length	length	NOUN
fuelectenerg-900	277	95	)	)	PUNCT
fuelectenerg-900	277	96	is	be	AUX
fuelectenerg-900	277	97	high	high	ADJ
fuelectenerg-900	277	98	.	.	PUNCT
fuelectenerg-900	278	1	fig	fig	NOUN
fuelectenerg-900	278	2	.	.	PUNCT
fuelectenerg-900	279	1	4	4	NUM
fuelectenerg-900	279	2	shows	show	VERB
fuelectenerg-900	279	3	the	the	DET
fuelectenerg-900	279	4	calculated	calculated	ADJ
fuelectenerg-900	279	5	dependence	dependence	NOUN
fuelectenerg-900	279	6	of	of	ADP
fuelectenerg-900	279	7	the	the	DET
fuelectenerg-900	279	8	resonant	resonant	ADJ
fuelectenerg-900	279	9	frequency	frequency	NOUN
fuelectenerg-900	279	10	on	on	ADP
fuelectenerg-900	279	11	h	h	PROPN
fuelectenerg-900	279	12	/	/	SYM
fuelectenerg-900	279	13	l	l	NOUN
fuelectenerg-900	279	14	2	2	NUM
fuelectenerg-900	279	15	for	for	ADP
fuelectenerg-900	279	16	the	the	DET
fuelectenerg-900	279	17	beams	beam	NOUN
fuelectenerg-900	279	18	made	make	VERB
fuelectenerg-900	279	19	of	of	ADP
fuelectenerg-900	279	20	different	different	ADJ
fuelectenerg-900	279	21	materials	material	NOUN
fuelectenerg-900	279	22	commonly	commonly	ADV
fuelectenerg-900	279	23	used	use	VERB
fuelectenerg-900	279	24	in	in	ADP
fuelectenerg-900	279	25	mems	mem	NOUN
fuelectenerg-900	279	26	and	and	CCONJ
fuelectenerg-900	279	27	characterized	characterize	VERB
fuelectenerg-900	279	28	by	by	ADP
fuelectenerg-900	279	29	the	the	DET
fuelectenerg-900	279	30	ratio	ratio	NOUN
fuelectenerg-900	279	31	e	e	PROPN
fuelectenerg-900	279	32	/	/	SYM
fuelectenerg-900	279	33	ρ	ρ	PROPN
fuelectenerg-900	279	34	.	.	PUNCT
fuelectenerg-900	280	1	this	this	DET
fuelectenerg-900	280	2	diagram	diagram	NOUN
fuelectenerg-900	280	3	is	be	AUX
fuelectenerg-900	280	4	created	create	VERB
fuelectenerg-900	280	5	based	base	VERB
fuelectenerg-900	280	6	on	on	ADP
fuelectenerg-900	280	7	the	the	DET
fuelectenerg-900	280	8	diagram	diagram	NOUN
fuelectenerg-900	280	9	in	in	ADP
fuelectenerg-900	280	10	ref	ref	NOUN
fuelectenerg-900	280	11	.	.	PUNCT
fuelectenerg-900	281	1	[	[	X
fuelectenerg-900	281	2	66	66	NUM
fuelectenerg-900	281	3	]	]	PUNCT
fuelectenerg-900	281	4	.	.	PUNCT
fuelectenerg-900	282	1	it	it	PRON
fuelectenerg-900	282	2	leads	lead	VERB
fuelectenerg-900	282	3	to	to	ADP
fuelectenerg-900	282	4	the	the	DET
fuelectenerg-900	282	5	conclusion	conclusion	NOUN
fuelectenerg-900	282	6	about	about	ADP
fuelectenerg-900	282	7	the	the	DET
fuelectenerg-900	282	8	values	value	NOUN
fuelectenerg-900	282	9	of	of	ADP
fuelectenerg-900	282	10	the	the	DET
fuelectenerg-900	282	11	h	h	NOUN
fuelectenerg-900	282	12	/	/	SYM
fuelectenerg-900	282	13	l	l	NOUN
fuelectenerg-900	282	14	2	2	NUM
fuelectenerg-900	282	15	ratio	ratio	NOUN
fuelectenerg-900	282	16	at	at	ADP
fuelectenerg-900	282	17	which	which	PRON
fuelectenerg-900	282	18	ghz	ghz	NOUN
fuelectenerg-900	282	19	frequencies	frequency	NOUN
fuelectenerg-900	282	20	can	can	AUX
fuelectenerg-900	282	21	be	be	AUX
fuelectenerg-900	282	22	achieved	achieve	VERB
fuelectenerg-900	282	23	with	with	ADP
fuelectenerg-900	282	24	a	a	DET
fuelectenerg-900	282	25	beam	beam	NOUN
fuelectenerg-900	282	26	made	make	VERB
fuelectenerg-900	282	27	of	of	ADP
fuelectenerg-900	282	28	a	a	DET
fuelectenerg-900	282	29	certain	certain	ADJ
fuelectenerg-900	282	30	material	material	NOUN
fuelectenerg-900	282	31	.	.	PUNCT
fuelectenerg-900	283	1	the	the	DET
fuelectenerg-900	283	2	calculation	calculation	NOUN
fuelectenerg-900	283	3	results	result	NOUN
fuelectenerg-900	283	4	(	(	PUNCT
fuelectenerg-900	283	5	according	accord	VERB
fuelectenerg-900	283	6	to	to	ADP
fuelectenerg-900	283	7	the	the	DET
fuelectenerg-900	283	8	expression	expression	NOUN
fuelectenerg-900	283	9	for	for	ADP
fuelectenerg-900	283	10	f0	f0	PROPN
fuelectenerg-900	283	11	given	give	VERB
fuelectenerg-900	283	12	above	above	ADV
fuelectenerg-900	283	13	)	)	PUNCT
fuelectenerg-900	283	14	suggest	suggest	VERB
fuelectenerg-900	283	15	that	that	SCONJ
fuelectenerg-900	283	16	resonators	resonator	NOUN
fuelectenerg-900	283	17	with	with	ADP
fuelectenerg-900	283	18	ghz	ghz	NOUN
fuelectenerg-900	283	19	fundamental	fundamental	ADJ
fuelectenerg-900	283	20	resonance	resonance	NOUN
fuelectenerg-900	283	21	frequencies	frequency	NOUN
fuelectenerg-900	283	22	have	have	VERB
fuelectenerg-900	283	23	nanometer	nanometer	NOUN
fuelectenerg-900	283	24	dimensions	dimension	NOUN
fuelectenerg-900	283	25	,	,	PUNCT
fuelectenerg-900	283	26	and	and	CCONJ
fuelectenerg-900	283	27	they	they	PRON
fuelectenerg-900	283	28	are	be	AUX
fuelectenerg-900	283	29	,	,	PUNCT
fuelectenerg-900	283	30	therefore	therefore	ADV
fuelectenerg-900	283	31	,	,	PUNCT
fuelectenerg-900	283	32	fabricated	fabricate	VERB
fuelectenerg-900	283	33	using	use	VERB
fuelectenerg-900	283	34	nems	nem	NOUN
fuelectenerg-900	283	35	technologies	technology	NOUN
fuelectenerg-900	283	36	.	.	PUNCT
fuelectenerg-900	284	1	in	in	ADP
fuelectenerg-900	284	2	a	a	DET
fuelectenerg-900	284	3	majority	majority	NOUN
fuelectenerg-900	284	4	of	of	ADP
fuelectenerg-900	284	5	mems	mem	NOUN
fuelectenerg-900	284	6	resonators	resonator	NOUN
fuelectenerg-900	284	7	realized	realize	VERB
fuelectenerg-900	284	8	so	so	ADV
fuelectenerg-900	284	9	far	far	ADV
fuelectenerg-900	284	10	,	,	PUNCT
fuelectenerg-900	284	11	resonance	resonance	NOUN
fuelectenerg-900	284	12	frequency	frequency	NOUN
fuelectenerg-900	284	13	tuning	tuning	NOUN
fuelectenerg-900	284	14	is	be	AUX
fuelectenerg-900	284	15	implemented	implement	VERB
fuelectenerg-900	284	16	in	in	ADP
fuelectenerg-900	284	17	order	order	NOUN
fuelectenerg-900	284	18	to	to	PART
fuelectenerg-900	284	19	compensate	compensate	VERB
fuelectenerg-900	284	20	temperature	temperature	NOUN
fuelectenerg-900	284	21	or	or	CCONJ
fuelectenerg-900	284	22	fabrication	fabrication	NOUN
fuelectenerg-900	284	23	process	process	NOUN
fuelectenerg-900	284	24	variations	variation	NOUN
fuelectenerg-900	284	25	of	of	ADP
fuelectenerg-900	284	26	the	the	DET
fuelectenerg-900	284	27	resonator	resonator	NOUN
fuelectenerg-900	284	28	parameters	parameter	NOUN
fuelectenerg-900	284	29	.	.	PUNCT
fuelectenerg-900	285	1	several	several	ADJ
fuelectenerg-900	285	2	frequency	frequency	NOUN
fuelectenerg-900	285	3	-	-	PUNCT
fuelectenerg-900	285	4	tuning	tune	VERB
fuelectenerg-900	285	5	methods	method	NOUN
fuelectenerg-900	285	6	have	have	AUX
fuelectenerg-900	285	7	been	be	AUX
fuelectenerg-900	285	8	reported	report	VERB
fuelectenerg-900	285	9	as	as	SCONJ
fuelectenerg-900	285	10	mentioned	mention	VERB
fuelectenerg-900	285	11	before	before	ADV
fuelectenerg-900	285	12	.	.	PUNCT
fuelectenerg-900	286	1	however	however	ADV
fuelectenerg-900	286	2	,	,	PUNCT
fuelectenerg-900	286	3	tunable	tunable	ADJ
fuelectenerg-900	286	4	rf	rf	ADJ
fuelectenerg-900	286	5	components	component	NOUN
fuelectenerg-900	286	6	for	for	ADP
fuelectenerg-900	286	7	multiband	multiband	NOUN
fuelectenerg-900	286	8	transceivers	transceiver	NOUN
fuelectenerg-900	286	9	require	require	VERB
fuelectenerg-900	286	10	a	a	DET
fuelectenerg-900	286	11	much	much	ADV
fuelectenerg-900	286	12	greater	great	ADJ
fuelectenerg-900	286	13	frequency	frequency	NOUN
fuelectenerg-900	286	14	tuning	tuning	NOUN
fuelectenerg-900	286	15	range	range	NOUN
fuelectenerg-900	286	16	compared	compare	VERB
fuelectenerg-900	286	17	to	to	ADP
fuelectenerg-900	286	18	both	both	DET
fuelectenerg-900	286	19	temperature	temperature	NOUN
fuelectenerg-900	286	20	and	and	CCONJ
fuelectenerg-900	286	21	process	process	NOUN
fuelectenerg-900	286	22	variation	variation	NOUN
fuelectenerg-900	286	23	compensation	compensation	NOUN
fuelectenerg-900	286	24	.	.	PUNCT
fuelectenerg-900	287	1	mechanical	mechanical	ADJ
fuelectenerg-900	287	2	tuning	tuning	NOUN
fuelectenerg-900	287	3	methods	method	NOUN
fuelectenerg-900	287	4	based	base	VERB
fuelectenerg-900	287	5	on	on	ADP
fuelectenerg-900	287	6	the	the	DET
fuelectenerg-900	287	7	change	change	NOUN
fuelectenerg-900	287	8	of	of	ADP
fuelectenerg-900	287	9	the	the	DET
fuelectenerg-900	287	10	resonator	resonator	NOUN
fuelectenerg-900	287	11	's	's	PART
fuelectenerg-900	287	12	effective	effective	ADJ
fuelectenerg-900	287	13	spring	spring	NOUN
fuelectenerg-900	287	14	constant	constant	ADJ
fuelectenerg-900	287	15	can	can	AUX
fuelectenerg-900	287	16	yield	yield	VERB
fuelectenerg-900	287	17	a	a	DET
fuelectenerg-900	287	18	high	high	ADJ
fuelectenerg-900	287	19	tuning	tuning	NOUN
fuelectenerg-900	287	20	range	range	NOUN
fuelectenerg-900	287	21	without	without	ADP
fuelectenerg-900	287	22	significant	significant	ADJ
fuelectenerg-900	287	23	degradation	degradation	NOUN
fuelectenerg-900	287	24	of	of	ADP
fuelectenerg-900	287	25	the	the	DET
fuelectenerg-900	287	26	q	q	NOUN
fuelectenerg-900	287	27	factor	factor	NOUN
fuelectenerg-900	287	28	,	,	PUNCT
fuelectenerg-900	287	29	and	and	CCONJ
fuelectenerg-900	287	30	are	be	AUX
fuelectenerg-900	287	31	simple	simple	ADJ
fuelectenerg-900	287	32	for	for	ADP
fuelectenerg-900	287	33	implementation	implementation	NOUN
fuelectenerg-900	287	34	.	.	PUNCT
fuelectenerg-900	288	1	resonators	resonator	NOUN
fuelectenerg-900	288	2	with	with	ADP
fuelectenerg-900	288	3	a	a	DET
fuelectenerg-900	288	4	high	high	ADJ
fuelectenerg-900	288	5	f0	f0	NOUN
fuelectenerg-900	288	6	due	due	ADP
fuelectenerg-900	288	7	to	to	ADP
fuelectenerg-900	288	8	a	a	DET
fuelectenerg-900	288	9	high	high	ADJ
fuelectenerg-900	288	10	mechanical	mechanical	ADJ
fuelectenerg-900	288	11	stiffness	stiffness	NOUN
fuelectenerg-900	288	12	(	(	PUNCT
fuelectenerg-900	288	13	oscillating	oscillate	VERB
fuelectenerg-900	288	14	in	in	ADP
fuelectenerg-900	288	15	bulk	bulk	ADJ
fuelectenerg-900	288	16	modes	mode	NOUN
fuelectenerg-900	288	17	)	)	PUNCT
fuelectenerg-900	288	18	have	have	VERB
fuelectenerg-900	288	19	a	a	DET
fuelectenerg-900	288	20	lower	low	ADJ
fuelectenerg-900	288	21	tunability	tunability	NOUN
fuelectenerg-900	288	22	than	than	ADP
fuelectenerg-900	288	23	flexural	flexural	ADJ
fuelectenerg-900	288	24	resonators	resonator	NOUN
fuelectenerg-900	288	25	.	.	PUNCT
fuelectenerg-900	289	1	one	one	NUM
fuelectenerg-900	289	2	of	of	ADP
fuelectenerg-900	289	3	the	the	DET
fuelectenerg-900	289	4	methods	method	NOUN
fuelectenerg-900	289	5	for	for	ADP
fuelectenerg-900	289	6	frequency	frequency	NOUN
fuelectenerg-900	289	7	tuning	tuning	NOUN
fuelectenerg-900	289	8	through	through	ADP
fuelectenerg-900	289	9	the	the	DET
fuelectenerg-900	289	10	change	change	NOUN
fuelectenerg-900	289	11	of	of	ADP
fuelectenerg-900	289	12	the	the	DET
fuelectenerg-900	289	13	effective	effective	ADJ
fuelectenerg-900	289	14	spring	spring	NOUN
fuelectenerg-900	289	15	constant	constant	ADJ
fuelectenerg-900	289	16	is	be	AUX
fuelectenerg-900	289	17	based	base	VERB
fuelectenerg-900	289	18	on	on	ADP
fuelectenerg-900	289	19	the	the	DET
fuelectenerg-900	289	20	application	application	NOUN
fuelectenerg-900	289	21	of	of	ADP
fuelectenerg-900	289	22	mechanical	mechanical	ADJ
fuelectenerg-900	289	23	tension	tension	NOUN
fuelectenerg-900	289	24	,	,	PUNCT
fuelectenerg-900	289	25	i.e.	i.e.	X
fuelectenerg-900	289	26	tensile	tensile	NOUN
fuelectenerg-900	289	27	strain	strain	NOUN
fuelectenerg-900	289	28	on	on	ADP
fuelectenerg-900	289	29	the	the	DET
fuelectenerg-900	289	30	resonant	resonant	ADJ
fuelectenerg-900	289	31	structure	structure	NOUN
fuelectenerg-900	289	32	.	.	PUNCT
fuelectenerg-900	290	1	for	for	ADP
fuelectenerg-900	290	2	example	example	NOUN
fuelectenerg-900	290	3	,	,	PUNCT
fuelectenerg-900	290	4	rf	rf	ADJ
fuelectenerg-900	290	5	mems	mem	NOUN
fuelectenerg-900	290	6	/	/	SYM
fuelectenerg-900	290	7	nems	nem	NOUN
fuelectenerg-900	290	8	resonators	resonator	NOUN
fuelectenerg-900	290	9	for	for	ADP
fuelectenerg-900	290	10	wireless	wireless	ADJ
fuelectenerg-900	290	11	communication	communication	NOUN
fuelectenerg-900	290	12	systems	system	NOUN
fuelectenerg-900	290	13	and	and	CCONJ
fuelectenerg-900	290	14	adsorption	adsorption	NOUN
fuelectenerg-900	290	15	-	-	PUNCT
fuelectenerg-900	290	16	desorption	desorption	NOUN
fuelectenerg-900	290	17	phase	phase	NOUN
fuelectenerg-900	290	18	noise	noise	NOUN
fuelectenerg-900	290	19	359	359	NUM
fuelectenerg-900	290	20	the	the	DET
fuelectenerg-900	290	21	resonant	resonant	ADJ
fuelectenerg-900	290	22	structure	structure	NOUN
fuelectenerg-900	290	23	can	can	AUX
fuelectenerg-900	290	24	be	be	AUX
fuelectenerg-900	290	25	exposed	expose	VERB
fuelectenerg-900	290	26	to	to	ADP
fuelectenerg-900	290	27	mechanical	mechanical	ADJ
fuelectenerg-900	290	28	stress	stress	NOUN
fuelectenerg-900	290	29	by	by	ADP
fuelectenerg-900	290	30	using	use	VERB
fuelectenerg-900	290	31	electrothermal	electrothermal	ADJ
fuelectenerg-900	290	32	actuators	actuator	NOUN
fuelectenerg-900	290	33	(	(	PUNCT
fuelectenerg-900	290	34	they	they	PRON
fuelectenerg-900	290	35	require	require	VERB
fuelectenerg-900	290	36	a	a	DET
fuelectenerg-900	290	37	significant	significant	ADJ
fuelectenerg-900	290	38	amount	amount	NOUN
fuelectenerg-900	290	39	of	of	ADP
fuelectenerg-900	290	40	additional	additional	ADJ
fuelectenerg-900	290	41	surface	surface	NOUN
fuelectenerg-900	290	42	area	area	NOUN
fuelectenerg-900	290	43	)	)	PUNCT
fuelectenerg-900	290	44	,	,	PUNCT
fuelectenerg-900	290	45	by	by	ADP
fuelectenerg-900	290	46	utilizing	utilize	VERB
fuelectenerg-900	290	47	a	a	DET
fuelectenerg-900	290	48	more	more	ADV
fuelectenerg-900	290	49	compact	compact	ADJ
fuelectenerg-900	290	50	capacitive	capacitive	ADJ
fuelectenerg-900	290	51	tuning	tuning	NOUN
fuelectenerg-900	290	52	in	in	ADP
fuelectenerg-900	290	53	which	which	PRON
fuelectenerg-900	290	54	the	the	DET
fuelectenerg-900	290	55	structure	structure	NOUN
fuelectenerg-900	290	56	deforms	deform	VERB
fuelectenerg-900	290	57	under	under	ADP
fuelectenerg-900	290	58	the	the	DET
fuelectenerg-900	290	59	influence	influence	NOUN
fuelectenerg-900	290	60	of	of	ADP
fuelectenerg-900	290	61	electrostatic	electrostatic	ADJ
fuelectenerg-900	290	62	force	force	NOUN
fuelectenerg-900	290	63	,	,	PUNCT
fuelectenerg-900	290	64	or	or	CCONJ
fuelectenerg-900	290	65	by	by	ADP
fuelectenerg-900	290	66	some	some	DET
fuelectenerg-900	290	67	other	other	ADJ
fuelectenerg-900	290	68	mechanism	mechanism	NOUN
fuelectenerg-900	290	69	.	.	PUNCT
fuelectenerg-900	291	1	we	we	PRON
fuelectenerg-900	291	2	analyze	analyze	VERB
fuelectenerg-900	291	3	the	the	DET
fuelectenerg-900	291	4	resonance	resonance	NOUN
fuelectenerg-900	291	5	frequency	frequency	NOUN
fuelectenerg-900	291	6	dependence	dependence	NOUN
fuelectenerg-900	291	7	on	on	ADP
fuelectenerg-900	291	8	mechanical	mechanical	ADJ
fuelectenerg-900	291	9	tension	tension	NOUN
fuelectenerg-900	291	10	in	in	ADP
fuelectenerg-900	291	11	the	the	DET
fuelectenerg-900	291	12	case	case	NOUN
fuelectenerg-900	291	13	of	of	ADP
fuelectenerg-900	291	14	a	a	DET
fuelectenerg-900	291	15	clamped	clamp	VERB
fuelectenerg-900	291	16	-	-	PUNCT
fuelectenerg-900	291	17	clamped	clamp	VERB
fuelectenerg-900	291	18	beam	beam	NOUN
fuelectenerg-900	291	19	,	,	PUNCT
fuelectenerg-900	291	20	in	in	ADP
fuelectenerg-900	291	21	order	order	NOUN
fuelectenerg-900	291	22	to	to	PART
fuelectenerg-900	291	23	quantitatively	quantitatively	ADV
fuelectenerg-900	291	24	estimate	estimate	VERB
fuelectenerg-900	291	25	the	the	DET
fuelectenerg-900	291	26	capabilities	capability	NOUN
fuelectenerg-900	291	27	of	of	ADP
fuelectenerg-900	291	28	the	the	DET
fuelectenerg-900	291	29	method	method	NOUN
fuelectenerg-900	291	30	in	in	ADP
fuelectenerg-900	291	31	terms	term	NOUN
fuelectenerg-900	291	32	of	of	ADP
fuelectenerg-900	291	33	both	both	CCONJ
fuelectenerg-900	291	34	the	the	DET
fuelectenerg-900	291	35	tuning	tuning	NOUN
fuelectenerg-900	291	36	range	range	NOUN
fuelectenerg-900	291	37	and	and	CCONJ
fuelectenerg-900	291	38	the	the	DET
fuelectenerg-900	291	39	influence	influence	NOUN
fuelectenerg-900	291	40	of	of	ADP
fuelectenerg-900	291	41	the	the	DET
fuelectenerg-900	291	42	resonator	resonator	NOUN
fuelectenerg-900	291	43	's	's	PART
fuelectenerg-900	291	44	parameters	parameter	NOUN
fuelectenerg-900	291	45	on	on	ADP
fuelectenerg-900	291	46	the	the	DET
fuelectenerg-900	291	47	tuning	tuning	NOUN
fuelectenerg-900	291	48	range	range	NOUN
fuelectenerg-900	291	49	.	.	PUNCT
fuelectenerg-900	292	1	fig	fig	NOUN
fuelectenerg-900	292	2	.	.	PUNCT
fuelectenerg-900	293	1	4	4	NUM
fuelectenerg-900	293	2	doubly	doubly	ADV
fuelectenerg-900	293	3	clamped	clamp	VERB
fuelectenerg-900	293	4	beam	beam	NOUN
fuelectenerg-900	293	5	resonator	resonator	NOUN
fuelectenerg-900	293	6	oscillating	oscillating	NOUN
fuelectenerg-900	293	7	in	in	ADP
fuelectenerg-900	293	8	the	the	DET
fuelectenerg-900	293	9	first	first	ADJ
fuelectenerg-900	293	10	flexural	flexural	ADJ
fuelectenerg-900	293	11	mode	mode	NOUN
fuelectenerg-900	293	12	:	:	PUNCT
fuelectenerg-900	293	13	a	a	X
fuelectenerg-900	293	14	)	)	PUNCT
fuelectenerg-900	293	15	the	the	DET
fuelectenerg-900	293	16	dependence	dependence	NOUN
fuelectenerg-900	293	17	of	of	ADP
fuelectenerg-900	293	18	the	the	DET
fuelectenerg-900	293	19	resonance	resonance	NOUN
fuelectenerg-900	293	20	frequency	frequency	NOUN
fuelectenerg-900	293	21	on	on	ADP
fuelectenerg-900	293	22	the	the	DET
fuelectenerg-900	293	23	geometrical	geometrical	ADJ
fuelectenerg-900	293	24	parameter	parameter	NOUN
fuelectenerg-900	293	25	h	h	NOUN
fuelectenerg-900	293	26	/	/	SYM
fuelectenerg-900	293	27	l	l	NOUN
fuelectenerg-900	293	28	2	2	NUM
fuelectenerg-900	293	29	(	(	PUNCT
fuelectenerg-900	293	30	h	h	NOUN
fuelectenerg-900	293	31	is	be	AUX
fuelectenerg-900	293	32	the	the	DET
fuelectenerg-900	293	33	beam	beam	NOUN
fuelectenerg-900	293	34	thickness	thickness	NOUN
fuelectenerg-900	293	35	,	,	PUNCT
fuelectenerg-900	293	36	and	and	CCONJ
fuelectenerg-900	293	37	l	l	NOUN
fuelectenerg-900	293	38	is	be	AUX
fuelectenerg-900	293	39	its	its	PRON
fuelectenerg-900	293	40	length	length	NOUN
fuelectenerg-900	293	41	)	)	PUNCT
fuelectenerg-900	293	42	,	,	PUNCT
fuelectenerg-900	293	43	for	for	ADP
fuelectenerg-900	293	44	the	the	DET
fuelectenerg-900	293	45	beams	beam	NOUN
fuelectenerg-900	293	46	made	make	VERB
fuelectenerg-900	293	47	of	of	ADP
fuelectenerg-900	293	48	different	different	ADJ
fuelectenerg-900	293	49	materials	material	NOUN
fuelectenerg-900	293	50	,	,	PUNCT
fuelectenerg-900	293	51	characterized	characterize	VERB
fuelectenerg-900	293	52	by	by	ADP
fuelectenerg-900	293	53	the	the	DET
fuelectenerg-900	293	54	ratio	ratio	NOUN
fuelectenerg-900	293	55	e	e	PROPN
fuelectenerg-900	293	56	/	/	SYM
fuelectenerg-900	293	57	ρ	ρ	PROPN
fuelectenerg-900	293	58	,	,	PUNCT
fuelectenerg-900	293	59	b	b	NOUN
fuelectenerg-900	293	60	)	)	PUNCT
fuelectenerg-900	293	61	left	leave	VERB
fuelectenerg-900	293	62	axis	axis	NOUN
fuelectenerg-900	293	63	:	:	PUNCT
fuelectenerg-900	293	64	dependence	dependence	NOUN
fuelectenerg-900	293	65	of	of	ADP
fuelectenerg-900	293	66	the	the	DET
fuelectenerg-900	293	67	eigenvalue	eigenvalue	ADJ
fuelectenerg-900	293	68	z1	z1	NOUN
fuelectenerg-900	293	69	(	(	PUNCT
fuelectenerg-900	293	70	determining	determine	VERB
fuelectenerg-900	293	71	the	the	DET
fuelectenerg-900	293	72	resonance	resonance	NOUN
fuelectenerg-900	293	73	frequency	frequency	NOUN
fuelectenerg-900	293	74	)	)	PUNCT
fuelectenerg-900	293	75	on	on	ADP
fuelectenerg-900	293	76	the	the	DET
fuelectenerg-900	293	77	tension	tension	NOUN
fuelectenerg-900	293	78	dependent	dependent	ADJ
fuelectenerg-900	293	79	parameter	parameter	NOUN
fuelectenerg-900	294	1	p	p	X
fuelectenerg-900	294	2	,	,	PUNCT
fuelectenerg-900	294	3	right	right	ADJ
fuelectenerg-900	294	4	axis	axis	NOUN
fuelectenerg-900	294	5	:	:	PUNCT
fuelectenerg-900	294	6	ratio	ratio	NOUN
fuelectenerg-900	294	7	of	of	ADP
fuelectenerg-900	294	8	the	the	DET
fuelectenerg-900	294	9	resonance	resonance	NOUN
fuelectenerg-900	294	10	frequency	frequency	NOUN
fuelectenerg-900	294	11	of	of	ADP
fuelectenerg-900	294	12	an	an	DET
fuelectenerg-900	294	13	arbitrary	arbitrary	ADJ
fuelectenerg-900	294	14	beam	beam	NOUN
fuelectenerg-900	294	15	under	under	ADP
fuelectenerg-900	294	16	the	the	DET
fuelectenerg-900	294	17	tension	tension	NOUN
fuelectenerg-900	294	18	and	and	CCONJ
fuelectenerg-900	294	19	the	the	DET
fuelectenerg-900	294	20	resonance	resonance	NOUN
fuelectenerg-900	294	21	frequency	frequency	NOUN
fuelectenerg-900	294	22	in	in	ADP
fuelectenerg-900	294	23	the	the	DET
fuelectenerg-900	294	24	absence	absence	NOUN
fuelectenerg-900	294	25	of	of	ADP
fuelectenerg-900	294	26	the	the	DET
fuelectenerg-900	294	27	tension	tension	NOUN
fuelectenerg-900	294	28	,	,	PUNCT
fuelectenerg-900	294	29	as	as	ADP
fuelectenerg-900	294	30	a	a	DET
fuelectenerg-900	294	31	function	function	NOUN
fuelectenerg-900	294	32	of	of	ADP
fuelectenerg-900	294	33	p	p	NOUN
fuelectenerg-900	294	34	(	(	PUNCT
fuelectenerg-900	294	35	p=12(l	p=12(l	NOUN
fuelectenerg-900	294	36	/	/	SYM
fuelectenerg-900	294	37	h	h	NOUN
fuelectenerg-900	294	38	)	)	PUNCT
fuelectenerg-900	294	39	2	2	NUM
fuelectenerg-900	295	1	,	,	PUNCT
fuelectenerg-900	295	2			PROPN
fuelectenerg-900	295	3	is	be	AUX
fuelectenerg-900	295	4	the	the	DET
fuelectenerg-900	295	5	uniaxial	uniaxial	ADJ
fuelectenerg-900	295	6	tensile	tensile	NOUN
fuelectenerg-900	295	7	strain	strain	NOUN
fuelectenerg-900	295	8	)	)	PUNCT
fuelectenerg-900	295	9	.	.	PUNCT
fuelectenerg-900	296	1	the	the	DET
fuelectenerg-900	296	2	resonance	resonance	NOUN
fuelectenerg-900	296	3	frequency	frequency	NOUN
fuelectenerg-900	296	4	of	of	ADP
fuelectenerg-900	296	5	the	the	DET
fuelectenerg-900	296	6	n	n	CCONJ
fuelectenerg-900	296	7	-	-	PUNCT
fuelectenerg-900	296	8	th	th	VERB
fuelectenerg-900	296	9	flexural	flexural	ADJ
fuelectenerg-900	296	10	mode	mode	NOUN
fuelectenerg-900	296	11	of	of	ADP
fuelectenerg-900	296	12	a	a	DET
fuelectenerg-900	296	13	resonant	resonant	ADJ
fuelectenerg-900	296	14	structure	structure	NOUN
fuelectenerg-900	296	15	in	in	ADP
fuelectenerg-900	296	16	the	the	DET
fuelectenerg-900	296	17	shape	shape	NOUN
fuelectenerg-900	296	18	of	of	ADP
fuelectenerg-900	296	19	a	a	DET
fuelectenerg-900	296	20	double	double	ADJ
fuelectenerg-900	296	21	-	-	PUNCT
fuelectenerg-900	296	22	clamped	clamp	VERB
fuelectenerg-900	296	23	beam	beam	NOUN
fuelectenerg-900	296	24	,	,	PUNCT
fuelectenerg-900	296	25	under	under	ADP
fuelectenerg-900	296	26	the	the	DET
fuelectenerg-900	296	27	tension	tension	NOUN
fuelectenerg-900	296	28	n	n	CCONJ
fuelectenerg-900	296	29	,	,	PUNCT
fuelectenerg-900	296	30	is	be	AUX
fuelectenerg-900	296	31	given	give	VERB
fuelectenerg-900	296	32	as	as	ADP
fuelectenerg-900	296	33	)	)	PUNCT
fuelectenerg-900	296	34	(	(	PUNCT
fuelectenerg-900	296	35	)	)	PUNCT
fuelectenerg-900	296	36	(	(	PUNCT
fuelectenerg-900	296	37	1	1	NUM
fuelectenerg-900	296	38	ρπ2	ρπ2	NOUN
fuelectenerg-900	296	39	)	)	PUNCT
fuelectenerg-900	296	40	(	(	PUNCT
fuelectenerg-900	296	41	)	)	PUNCT
fuelectenerg-900	296	42	(	(	PUNCT
fuelectenerg-900	296	43	)	)	PUNCT
fuelectenerg-900	296	44	(	(	PUNCT
fuelectenerg-900	296	45	1	1	NUM
fuelectenerg-900	296	46	)	)	PUNCT
fuelectenerg-900	296	47	0	0	NUM
fuelectenerg-900	296	48	(	(	PUNCT
fuelectenerg-900	296	49	)	)	PUNCT
fuelectenerg-900	296	50	(	(	PUNCT
fuelectenerg-900	296	51	)	)	PUNCT
fuelectenerg-900	296	52	0	0	NUM
fuelectenerg-900	296	53	(	(	PUNCT
fuelectenerg-900	296	54	)	)	PUNCT
fuelectenerg-900	296	55	(	(	PUNCT
fuelectenerg-900	296	56	22	22	NUM
fuelectenerg-900	296	57	2	2	NUM
fuelectenerg-900	296	58	22	22	NUM
fuelectenerg-900	296	59	2	2	NUM
fuelectenerg-900	296	60	00	00	NUM
fuelectenerg-900	296	61	nz	nz	PROPN
fuelectenerg-900	296	62	np	np	INTJ
fuelectenerg-900	296	63	wh	wh	NOUN
fuelectenerg-900	296	64	ei	ei	ADP
fuelectenerg-900	296	65	l	l	PROPN
fuelectenerg-900	296	66	nz	nz	PROPN
fuelectenerg-900	296	67	nz	nz	PROPN
fuelectenerg-900	297	1	np	np	INTJ
fuelectenerg-900	297	2	z	z	PROPN
fuelectenerg-900	297	3	nz	nz	PROPN
fuelectenerg-900	297	4	fnf	fnf	PROPN
fuelectenerg-900	297	5	n	n	CCONJ
fuelectenerg-900	297	6	n	n	CCONJ
fuelectenerg-900	297	7	nn	nn	PROPN
fuelectenerg-900	297	8	n	n	CCONJ
fuelectenerg-900	297	9	nn	nn	PROPN
fuelectenerg-900	297	10			PROPN
fuelectenerg-900	297	11	(	(	PUNCT
fuelectenerg-900	297	12	1	1	NUM
fuelectenerg-900	297	13	)	)	PUNCT
fuelectenerg-900	298	1	where	where	SCONJ
fuelectenerg-900	298	2	fn0(0	fn0(0	NOUN
fuelectenerg-900	298	3	)	)	PUNCT
fuelectenerg-900	298	4	is	be	AUX
fuelectenerg-900	298	5	the	the	DET
fuelectenerg-900	298	6	beam	beam	NOUN
fuelectenerg-900	298	7	's	's	PART
fuelectenerg-900	298	8	resonance	resonance	NOUN
fuelectenerg-900	298	9	frequency	frequency	NOUN
fuelectenerg-900	298	10	in	in	ADP
fuelectenerg-900	298	11	the	the	DET
fuelectenerg-900	298	12	absence	absence	NOUN
fuelectenerg-900	298	13	of	of	ADP
fuelectenerg-900	298	14	the	the	DET
fuelectenerg-900	298	15	tension	tension	NOUN
fuelectenerg-900	298	16	,	,	PUNCT
fuelectenerg-900	298	17	lwh	lwh	PROPN
fuelectenerg-900	298	18	are	be	AUX
fuelectenerg-900	298	19	the	the	DET
fuelectenerg-900	298	20	beam	beam	NOUN
fuelectenerg-900	298	21	's	's	PART
fuelectenerg-900	298	22	dimensions	dimension	NOUN
fuelectenerg-900	298	23	(	(	PUNCT
fuelectenerg-900	298	24	lengthwidththickness	lengthwidththickness	ADJ
fuelectenerg-900	298	25	)	)	PUNCT
fuelectenerg-900	298	26	,	,	PUNCT
fuelectenerg-900	298	27	e	e	X
fuelectenerg-900	298	28	is	be	AUX
fuelectenerg-900	298	29	the	the	DET
fuelectenerg-900	298	30	young	young	ADJ
fuelectenerg-900	298	31	modulus	modulus	NOUN
fuelectenerg-900	298	32	,	,	PUNCT
fuelectenerg-900	298	33	i	i	PRON
fuelectenerg-900	298	34	is	be	AUX
fuelectenerg-900	298	35	the	the	DET
fuelectenerg-900	298	36	moment	moment	NOUN
fuelectenerg-900	298	37	of	of	ADP
fuelectenerg-900	298	38	inertia	inertia	NOUN
fuelectenerg-900	298	39	(	(	PUNCT
fuelectenerg-900	298	40	i	i	NOUN
fuelectenerg-900	298	41	=	=	VERB
fuelectenerg-900	298	42	wh	wh	VERB
fuelectenerg-900	298	43	3	3	NUM
fuelectenerg-900	298	44	/12	/12	PUNCT
fuelectenerg-900	298	45	for	for	ADP
fuelectenerg-900	298	46	a	a	DET
fuelectenerg-900	298	47	beam	beam	NOUN
fuelectenerg-900	298	48	with	with	ADP
fuelectenerg-900	298	49	a	a	DET
fuelectenerg-900	298	50	rectangular	rectangular	ADJ
fuelectenerg-900	298	51	cross	cross	NOUN
fuelectenerg-900	298	52	-	-	NOUN
fuelectenerg-900	298	53	section	section	NOUN
fuelectenerg-900	298	54	)	)	PUNCT
fuelectenerg-900	298	55	,	,	PUNCT
fuelectenerg-900	298	56	and	and	CCONJ
fuelectenerg-900	298	57	the	the	DET
fuelectenerg-900	298	58	tensiondependent	tensiondependent	ADJ
fuelectenerg-900	298	59	parameter	parameter	NOUN
fuelectenerg-900	298	60	p	p	PROPN
fuelectenerg-900	298	61	is	be	AUX
fuelectenerg-900	298	62	ε)/(12)/	ε)/(12)/	VERB
fuelectenerg-900	298	63	(	(	PUNCT
fuelectenerg-900	298	64	)	)	PUNCT
fuelectenerg-900	298	65	(	(	PUNCT
fuelectenerg-900	298	66	22	22	NUM
fuelectenerg-900	298	67	hleinlnp	hleinlnp	NOUN
fuelectenerg-900	298	68			NUM
fuelectenerg-900	298	69	(	(	PUNCT
fuelectenerg-900	298	70	2	2	NUM
fuelectenerg-900	298	71	)	)	PUNCT
fuelectenerg-900	298	72	in	in	ADP
fuelectenerg-900	298	73	the	the	DET
fuelectenerg-900	298	74	above	above	ADJ
fuelectenerg-900	298	75	expression	expression	NOUN
fuelectenerg-900	298	76	ε	ε	PROPN
fuelectenerg-900	298	77	is	be	AUX
fuelectenerg-900	298	78	the	the	DET
fuelectenerg-900	298	79	applied	apply	VERB
fuelectenerg-900	298	80	uniaxial	uniaxial	ADJ
fuelectenerg-900	298	81	strain	strain	NOUN
fuelectenerg-900	298	82	.	.	PUNCT
fuelectenerg-900	299	1	the	the	DET
fuelectenerg-900	299	2	equation	equation	NOUN
fuelectenerg-900	299	3	that	that	PRON
fuelectenerg-900	299	4	has	have	VERB
fuelectenerg-900	299	5	to	to	PART
fuelectenerg-900	299	6	be	be	AUX
fuelectenerg-900	299	7	solved	solve	VERB
fuelectenerg-900	299	8	[	[	X
fuelectenerg-900	299	9	67	67	NUM
fuelectenerg-900	299	10	]	]	PUNCT
fuelectenerg-900	299	11	for	for	ADP
fuelectenerg-900	299	12	zn	zn	PROPN
fuelectenerg-900	299	13	in	in	ADP
fuelectenerg-900	299	14	order	order	NOUN
fuelectenerg-900	299	15	to	to	PART
fuelectenerg-900	299	16	obtain	obtain	VERB
fuelectenerg-900	299	17	the	the	DET
fuelectenerg-900	299	18	resonance	resonance	NOUN
fuelectenerg-900	299	19	frequency	frequency	NOUN
fuelectenerg-900	299	20	of	of	ADP
fuelectenerg-900	299	21	the	the	DET
fuelectenerg-900	299	22	n	n	CCONJ
fuelectenerg-900	299	23	-	-	PUNCT
fuelectenerg-900	299	24	th	th	VERB
fuelectenerg-900	299	25	flexural	flexural	ADJ
fuelectenerg-900	299	26	mode	mode	NOUN
fuelectenerg-900	299	27	of	of	ADP
fuelectenerg-900	299	28	a	a	DET
fuelectenerg-900	299	29	double	double	ADV
fuelectenerg-900	299	30	-	-	PUNCT
fuelectenerg-900	299	31	clamped	clamp	VERB
fuelectenerg-900	299	32	beam	beam	NOUN
fuelectenerg-900	299	33	under	under	ADP
fuelectenerg-900	299	34	tension	tension	NOUN
fuelectenerg-900	299	35	,	,	PUNCT
fuelectenerg-900	299	36	written	write	VERB
fuelectenerg-900	299	37	in	in	ADP
fuelectenerg-900	299	38	a	a	DET
fuelectenerg-900	299	39	convenient	convenient	ADJ
fuelectenerg-900	299	40	form	form	NOUN
fuelectenerg-900	299	41	,	,	PUNCT
fuelectenerg-900	299	42	is	be	AUX
fuelectenerg-900	299	43	1)/1sinh()sin()]/12/([)/1cosh()cos	1)/1sinh()sin()]/12/([)/1cosh()co	NOUN
fuelectenerg-900	299	44	(	(	PUNCT
fuelectenerg-900	299	45	2222	2222	NUM
fuelectenerg-900	299	46			NOUN
fuelectenerg-900	299	47	nnnnnnnn	nnnnnnnn	PROPN
fuelectenerg-900	299	48	zpzzzpzpzpzz	zpzzzpzpzpzz	PROPN
fuelectenerg-900	299	49	(	(	PUNCT
fuelectenerg-900	299	50	3	3	NUM
fuelectenerg-900	299	51	)	)	PUNCT
fuelectenerg-900	299	52	360	360	NUM
fuelectenerg-900	299	53	i.	i.	NOUN
fuelectenerg-900	299	54	jokić	jokić	PROPN
fuelectenerg-900	299	55	,	,	PUNCT
fuelectenerg-900	299	56	m.	m.	NOUN
fuelectenerg-900	299	57	frantlović	frantlović	NOUN
fuelectenerg-900	299	58	,	,	PUNCT
fuelectenerg-900	299	59	z.	z.	PROPN
fuelectenerg-900	299	60	djurić	djurić	PROPN
fuelectenerg-900	299	61	,	,	PUNCT
fuelectenerg-900	300	1	m.	m.	NOUN
fuelectenerg-900	300	2	l.	l.	PROPN
fuelectenerg-900	300	3	dukić	dukić	PROPN
fuelectenerg-900	300	4	this	this	DET
fuelectenerg-900	300	5	equation	equation	NOUN
fuelectenerg-900	300	6	is	be	AUX
fuelectenerg-900	300	7	solved	solve	VERB
fuelectenerg-900	300	8	for	for	ADP
fuelectenerg-900	300	9	the	the	DET
fuelectenerg-900	300	10	first	first	ADJ
fuelectenerg-900	300	11	(	(	PUNCT
fuelectenerg-900	300	12	fundamental	fundamental	ADJ
fuelectenerg-900	300	13	)	)	PUNCT
fuelectenerg-900	300	14	oscillation	oscillation	NOUN
fuelectenerg-900	300	15	mode	mode	NOUN
fuelectenerg-900	300	16	,	,	PUNCT
fuelectenerg-900	300	17	considering	consider	VERB
fuelectenerg-900	300	18	three	three	NUM
fuelectenerg-900	300	19	characteristic	characteristic	ADJ
fuelectenerg-900	300	20	cases	case	NOUN
fuelectenerg-900	300	21	:	:	PUNCT
fuelectenerg-900	300	22	a	a	X
fuelectenerg-900	300	23	)	)	PUNCT
fuelectenerg-900	300	24	when	when	SCONJ
fuelectenerg-900	300	25	p	p	NOUN
fuelectenerg-900	300	26	is	be	AUX
fuelectenerg-900	300	27	low	low	ADJ
fuelectenerg-900	300	28	,	,	PUNCT
fuelectenerg-900	300	29	i.e.	i.e.	X
fuelectenerg-900	300	30	p≈0	p≈0	ADJ
fuelectenerg-900	300	31	,	,	PUNCT
fuelectenerg-900	300	32	which	which	PRON
fuelectenerg-900	300	33	corresponds	correspond	VERB
fuelectenerg-900	300	34	to	to	ADP
fuelectenerg-900	300	35	the	the	DET
fuelectenerg-900	300	36	absence	absence	NOUN
fuelectenerg-900	300	37	of	of	ADP
fuelectenerg-900	300	38	tension	tension	NOUN
fuelectenerg-900	300	39	,	,	PUNCT
fuelectenerg-900	300	40	eq	eq	NOUN
fuelectenerg-900	300	41	.	.	PUNCT
fuelectenerg-900	301	1	(	(	PUNCT
fuelectenerg-900	301	2	3	3	X
fuelectenerg-900	301	3	)	)	PUNCT
fuelectenerg-900	301	4	becomes	become	VERB
fuelectenerg-900	301	5	1)cosh()cos	1)cosh()co	NOUN
fuelectenerg-900	301	6	(	(	PUNCT
fuelectenerg-900	301	7	nn	nn	NUM
fuelectenerg-900	301	8	zz	zz	PROPN
fuelectenerg-900	301	9	(	(	PUNCT
fuelectenerg-900	301	10	4	4	NUM
fuelectenerg-900	301	11	)	)	PUNCT
fuelectenerg-900	301	12	which	which	PRON
fuelectenerg-900	301	13	for	for	ADP
fuelectenerg-900	301	14	n=1	n=1	PROPN
fuelectenerg-900	301	15	yields	yield	NOUN
fuelectenerg-900	301	16	z1(0)=4.73	z1(0)=4.73	NUM
fuelectenerg-900	301	17	.	.	PUNCT
fuelectenerg-900	302	1	b	b	X
fuelectenerg-900	302	2	)	)	PUNCT
fuelectenerg-900	302	3	when	when	SCONJ
fuelectenerg-900	302	4	p	p	NOUN
fuelectenerg-900	302	5	is	be	AUX
fuelectenerg-900	302	6	high	high	ADJ
fuelectenerg-900	302	7	,	,	PUNCT
fuelectenerg-900	302	8	thus	thus	ADV
fuelectenerg-900	302	9	p	p	X
fuelectenerg-900	302	10	/	/	SYM
fuelectenerg-900	302	11	zn	zn	PROPN
fuelectenerg-900	302	12	2	2	NUM
fuelectenerg-900	302	13	>	>	PUNCT
fuelectenerg-900	302	14	>	>	PROPN
fuelectenerg-900	302	15	1	1	NUM
fuelectenerg-900	302	16	,	,	PUNCT
fuelectenerg-900	302	17	eq	eq	NOUN
fuelectenerg-900	302	18	.	.	PUNCT
fuelectenerg-900	303	1	(	(	PUNCT
fuelectenerg-900	303	2	3	3	X
fuelectenerg-900	303	3	)	)	PUNCT
fuelectenerg-900	303	4	is	be	AUX
fuelectenerg-900	303	5	approximately	approximately	ADV
fuelectenerg-900	303	6	0))/2(sin	0))/2(sin	NOUN
fuelectenerg-900	303	7	(	(	PUNCT
fuelectenerg-900	303	8			PROPN
fuelectenerg-900	303	9	pzarctgz	pzarctgz	PROPN
fuelectenerg-900	303	10	nn	nn	PROPN
fuelectenerg-900	303	11	(	(	PUNCT
fuelectenerg-900	303	12	5	5	NUM
fuelectenerg-900	303	13	)	)	PUNCT
fuelectenerg-900	303	14	and	and	CCONJ
fuelectenerg-900	303	15	its	its	PRON
fuelectenerg-900	303	16	solution	solution	NOUN
fuelectenerg-900	303	17	corresponding	correspond	VERB
fuelectenerg-900	303	18	to	to	ADP
fuelectenerg-900	303	19	the	the	DET
fuelectenerg-900	303	20	first	first	ADJ
fuelectenerg-900	303	21	mode	mode	NOUN
fuelectenerg-900	303	22	is	be	AUX
fuelectenerg-900	303	23	z1=.	z1=.	PROPN
fuelectenerg-900	303	24	c	c	PROPN
fuelectenerg-900	303	25	)	)	PUNCT
fuelectenerg-900	303	26	for	for	ADP
fuelectenerg-900	303	27	arbitrary	arbitrary	ADJ
fuelectenerg-900	303	28	p	p	X
fuelectenerg-900	303	29	,	,	PUNCT
fuelectenerg-900	303	30	eq	eq	NOUN
fuelectenerg-900	303	31	.	.	PUNCT
fuelectenerg-900	304	1	(	(	PUNCT
fuelectenerg-900	304	2	3	3	X
fuelectenerg-900	304	3	)	)	PUNCT
fuelectenerg-900	304	4	was	be	AUX
fuelectenerg-900	304	5	solved	solve	VERB
fuelectenerg-900	304	6	numerically	numerically	ADV
fuelectenerg-900	304	7	.	.	PUNCT
fuelectenerg-900	305	1	the	the	DET
fuelectenerg-900	305	2	obtained	obtain	VERB
fuelectenerg-900	305	3	dependence	dependence	NOUN
fuelectenerg-900	305	4	z1(p	z1(p	NUM
fuelectenerg-900	305	5	)	)	PUNCT
fuelectenerg-900	305	6	is	be	AUX
fuelectenerg-900	305	7	shown	show	VERB
fuelectenerg-900	305	8	graphically	graphically	ADV
fuelectenerg-900	305	9	in	in	ADP
fuelectenerg-900	305	10	fig	fig	NOUN
fuelectenerg-900	305	11	.	.	PUNCT
fuelectenerg-900	306	1	4b	4b	PROPN
fuelectenerg-900	306	2	(	(	PUNCT
fuelectenerg-900	306	3	the	the	DET
fuelectenerg-900	306	4	left	left	ADJ
fuelectenerg-900	306	5	axis	axis	NOUN
fuelectenerg-900	306	6	)	)	PUNCT
fuelectenerg-900	306	7	.	.	PUNCT
fuelectenerg-900	307	1	based	base	VERB
fuelectenerg-900	307	2	on	on	ADP
fuelectenerg-900	307	3	it	it	PRON
fuelectenerg-900	307	4	the	the	DET
fuelectenerg-900	307	5	frequency	frequency	NOUN
fuelectenerg-900	307	6	ratio	ratio	NOUN
fuelectenerg-900	307	7	f1(n)/f1(0	f1(n)/f1(0	NOUN
fuelectenerg-900	307	8	)	)	PUNCT
fuelectenerg-900	307	9	is	be	AUX
fuelectenerg-900	307	10	calculated	calculate	VERB
fuelectenerg-900	307	11	as	as	ADP
fuelectenerg-900	307	12	a	a	DET
fuelectenerg-900	307	13	function	function	NOUN
fuelectenerg-900	307	14	of	of	ADP
fuelectenerg-900	307	15	the	the	DET
fuelectenerg-900	307	16	parameter	parameter	NOUN
fuelectenerg-900	307	17	p	p	NOUN
fuelectenerg-900	307	18	and	and	CCONJ
fuelectenerg-900	307	19	shown	show	VERB
fuelectenerg-900	307	20	in	in	ADP
fuelectenerg-900	307	21	the	the	DET
fuelectenerg-900	307	22	same	same	ADJ
fuelectenerg-900	307	23	diagram	diagram	NOUN
fuelectenerg-900	307	24	(	(	PUNCT
fuelectenerg-900	307	25	the	the	DET
fuelectenerg-900	307	26	right	right	ADJ
fuelectenerg-900	307	27	axis	axis	NOUN
fuelectenerg-900	307	28	)	)	PUNCT
fuelectenerg-900	307	29	.	.	PUNCT
fuelectenerg-900	308	1	(	(	PUNCT
fuelectenerg-900	308	2	in	in	ADP
fuelectenerg-900	308	3	the	the	DET
fuelectenerg-900	308	4	remaining	remain	VERB
fuelectenerg-900	308	5	text	text	NOUN
fuelectenerg-900	308	6	and	and	CCONJ
fuelectenerg-900	308	7	diagrams	diagram	NOUN
fuelectenerg-900	308	8	the	the	DET
fuelectenerg-900	308	9	first	first	ADJ
fuelectenerg-900	308	10	mode	mode	NOUN
fuelectenerg-900	308	11	resonance	resonance	NOUN
fuelectenerg-900	308	12	frequency	frequency	NOUN
fuelectenerg-900	308	13	will	will	AUX
fuelectenerg-900	308	14	be	be	AUX
fuelectenerg-900	308	15	denoted	denote	VERB
fuelectenerg-900	308	16	with	with	ADP
fuelectenerg-900	308	17	f0	f0	PROPN
fuelectenerg-900	308	18	instead	instead	ADV
fuelectenerg-900	308	19	of	of	ADP
fuelectenerg-900	308	20	f10	f10	NOUN
fuelectenerg-900	308	21	.	.	PUNCT
fuelectenerg-900	308	22	)	)	PUNCT
fuelectenerg-900	309	1	this	this	DET
fuelectenerg-900	309	2	diagram	diagram	NOUN
fuelectenerg-900	309	3	gives	give	VERB
fuelectenerg-900	309	4	a	a	DET
fuelectenerg-900	309	5	general	general	ADJ
fuelectenerg-900	309	6	insight	insight	NOUN
fuelectenerg-900	309	7	into	into	ADP
fuelectenerg-900	309	8	the	the	DET
fuelectenerg-900	309	9	amount	amount	NOUN
fuelectenerg-900	309	10	of	of	ADP
fuelectenerg-900	309	11	change	change	NOUN
fuelectenerg-900	309	12	of	of	ADP
fuelectenerg-900	309	13	the	the	DET
fuelectenerg-900	309	14	resonance	resonance	NOUN
fuelectenerg-900	309	15	frequency	frequency	NOUN
fuelectenerg-900	309	16	of	of	ADP
fuelectenerg-900	309	17	an	an	DET
fuelectenerg-900	309	18	arbitrary	arbitrary	ADJ
fuelectenerg-900	309	19	beam	beam	NOUN
fuelectenerg-900	309	20	resonator	resonator	NOUN
fuelectenerg-900	309	21	oscillating	oscillating	NOUN
fuelectenerg-900	309	22	in	in	ADP
fuelectenerg-900	309	23	the	the	DET
fuelectenerg-900	309	24	given	give	VERB
fuelectenerg-900	309	25	mode	mode	NOUN
fuelectenerg-900	309	26	,	,	PUNCT
fuelectenerg-900	309	27	attainable	attainable	ADJ
fuelectenerg-900	309	28	by	by	ADP
fuelectenerg-900	309	29	applying	apply	VERB
fuelectenerg-900	309	30	an	an	DET
fuelectenerg-900	309	31	arbitrary	arbitrary	ADJ
fuelectenerg-900	309	32	tensile	tensile	NOUN
fuelectenerg-900	309	33	strain	strain	NOUN
fuelectenerg-900	309	34	.	.	PUNCT
fuelectenerg-900	310	1	for	for	ADP
fuelectenerg-900	310	2	a	a	DET
fuelectenerg-900	310	3	resonator	resonator	NOUN
fuelectenerg-900	310	4	with	with	ADP
fuelectenerg-900	310	5	a	a	DET
fuelectenerg-900	310	6	given	give	VERB
fuelectenerg-900	310	7	l	l	NOUN
fuelectenerg-900	310	8	/	/	SYM
fuelectenerg-900	310	9	h	h	NOUN
fuelectenerg-900	310	10	ratio	ratio	NOUN
fuelectenerg-900	310	11	and	and	CCONJ
fuelectenerg-900	310	12	under	under	ADP
fuelectenerg-900	310	13	a	a	DET
fuelectenerg-900	310	14	certain	certain	ADJ
fuelectenerg-900	310	15	amount	amount	NOUN
fuelectenerg-900	310	16	of	of	ADP
fuelectenerg-900	310	17	strain	strain	NOUN
fuelectenerg-900	310	18	,	,	PUNCT
fuelectenerg-900	310	19	the	the	DET
fuelectenerg-900	310	20	frequency	frequency	NOUN
fuelectenerg-900	310	21	tuning	tuning	NOUN
fuelectenerg-900	310	22	ratio	ratio	NOUN
fuelectenerg-900	310	23	can	can	AUX
fuelectenerg-900	310	24	be	be	AUX
fuelectenerg-900	310	25	obtained	obtain	VERB
fuelectenerg-900	310	26	based	base	VERB
fuelectenerg-900	310	27	on	on	ADP
fuelectenerg-900	310	28	eq	eq	ADP
fuelectenerg-900	310	29	.	.	PUNCT
fuelectenerg-900	311	1	(	(	PUNCT
fuelectenerg-900	311	2	2	2	NUM
fuelectenerg-900	311	3	)	)	PUNCT
fuelectenerg-900	311	4	.	.	PUNCT
fuelectenerg-900	312	1	for	for	ADP
fuelectenerg-900	312	2	example	example	NOUN
fuelectenerg-900	312	3	,	,	PUNCT
fuelectenerg-900	312	4	assuming	assume	VERB
fuelectenerg-900	312	5	the	the	DET
fuelectenerg-900	312	6	maximal	maximal	ADJ
fuelectenerg-900	312	7	strain	strain	NOUN
fuelectenerg-900	312	8	of	of	ADP
fuelectenerg-900	312	9	1	1	NUM
fuelectenerg-900	312	10	%	%	NOUN
fuelectenerg-900	312	11	(	(	PUNCT
fuelectenerg-900	312	12	corresponding	correspond	VERB
fuelectenerg-900	312	13	to	to	ADP
fuelectenerg-900	312	14	the	the	DET
fuelectenerg-900	312	15	yield	yield	NOUN
fuelectenerg-900	312	16	strength	strength	NOUN
fuelectenerg-900	312	17	of	of	ADP
fuelectenerg-900	312	18	common	common	ADJ
fuelectenerg-900	312	19	semiconductor	semiconductor	NOUN
fuelectenerg-900	312	20	materials	material	NOUN
fuelectenerg-900	312	21	used	use	VERB
fuelectenerg-900	312	22	in	in	ADP
fuelectenerg-900	312	23	mems	mem	NOUN
fuelectenerg-900	312	24	)	)	PUNCT
fuelectenerg-900	312	25	,	,	PUNCT
fuelectenerg-900	312	26	for	for	ADP
fuelectenerg-900	312	27	mems	mem	NOUN
fuelectenerg-900	312	28	resonators	resonator	NOUN
fuelectenerg-900	312	29	with	with	ADP
fuelectenerg-900	312	30	the	the	DET
fuelectenerg-900	312	31	ratio	ratio	NOUN
fuelectenerg-900	312	32	l	l	PROPN
fuelectenerg-900	312	33	/	/	SYM
fuelectenerg-900	312	34	h=60	h=60	PROPN
fuelectenerg-900	312	35	the	the	DET
fuelectenerg-900	312	36	parameter	parameter	PROPN
fuelectenerg-900	312	37	p=432	p=432	PROPN
fuelectenerg-900	312	38	,	,	PUNCT
fuelectenerg-900	312	39	so	so	SCONJ
fuelectenerg-900	312	40	the	the	DET
fuelectenerg-900	312	41	maximum	maximum	ADJ
fuelectenerg-900	312	42	tuning	tuning	NOUN
fuelectenerg-900	312	43	ratio	ratio	NOUN
fuelectenerg-900	312	44	of	of	ADP
fuelectenerg-900	312	45	3.3	3.3	NUM
fuelectenerg-900	312	46	is	be	AUX
fuelectenerg-900	312	47	obtained	obtain	VERB
fuelectenerg-900	312	48	from	from	ADP
fuelectenerg-900	312	49	the	the	DET
fuelectenerg-900	312	50	diagram	diagram	NOUN
fuelectenerg-900	312	51	.	.	PUNCT
fuelectenerg-900	313	1	the	the	DET
fuelectenerg-900	313	2	diagram	diagram	NOUN
fuelectenerg-900	313	3	in	in	ADP
fuelectenerg-900	313	4	fig	fig	NOUN
fuelectenerg-900	313	5	.	.	PUNCT
fuelectenerg-900	314	1	5a	5a	NUM
fuelectenerg-900	314	2	shows	show	VERB
fuelectenerg-900	314	3	the	the	DET
fuelectenerg-900	314	4	dependence	dependence	NOUN
fuelectenerg-900	314	5	of	of	ADP
fuelectenerg-900	314	6	the	the	DET
fuelectenerg-900	314	7	first	first	ADJ
fuelectenerg-900	314	8	flexural	flexural	ADJ
fuelectenerg-900	314	9	mode	mode	NOUN
fuelectenerg-900	314	10	resonance	resonance	NOUN
fuelectenerg-900	314	11	frequency	frequency	NOUN
fuelectenerg-900	314	12	of	of	ADP
fuelectenerg-900	314	13	doubly	doubly	ADV
fuelectenerg-900	314	14	clamped	clamp	VERB
fuelectenerg-900	314	15	beam	beam	NOUN
fuelectenerg-900	314	16	resonators	resonator	NOUN
fuelectenerg-900	314	17	(	(	PUNCT
fuelectenerg-900	314	18	l	l	NOUN
fuelectenerg-900	314	19	/	/	SYM
fuelectenerg-900	314	20	h=60	h=60	NOUN
fuelectenerg-900	314	21	)	)	PUNCT
fuelectenerg-900	314	22	,	,	PUNCT
fuelectenerg-900	314	23	made	make	VERB
fuelectenerg-900	314	24	of	of	ADP
fuelectenerg-900	314	25	various	various	ADJ
fuelectenerg-900	314	26	semiconductor	semiconductor	NOUN
fuelectenerg-900	314	27	materials	material	NOUN
fuelectenerg-900	314	28	commonly	commonly	ADV
fuelectenerg-900	314	29	used	use	VERB
fuelectenerg-900	314	30	in	in	ADP
fuelectenerg-900	314	31	mems	mem	NOUN
fuelectenerg-900	314	32	,	,	PUNCT
fuelectenerg-900	314	33	on	on	ADP
fuelectenerg-900	314	34	the	the	DET
fuelectenerg-900	314	35	applied	apply	VERB
fuelectenerg-900	314	36	uniaxial	uniaxial	ADJ
fuelectenerg-900	314	37	tensile	tensile	NOUN
fuelectenerg-900	314	38	strain	strain	NOUN
fuelectenerg-900	314	39	.	.	PUNCT
fuelectenerg-900	315	1	this	this	DET
fuelectenerg-900	315	2	dependence	dependence	NOUN
fuelectenerg-900	315	3	is	be	AUX
fuelectenerg-900	315	4	obtained	obtain	VERB
fuelectenerg-900	315	5	by	by	ADP
fuelectenerg-900	315	6	applying	apply	VERB
fuelectenerg-900	315	7	the	the	DET
fuelectenerg-900	315	8	presented	present	VERB
fuelectenerg-900	315	9	theory	theory	NOUN
fuelectenerg-900	315	10	.	.	PUNCT
fuelectenerg-900	316	1	two	two	NUM
fuelectenerg-900	316	2	distinct	distinct	ADJ
fuelectenerg-900	316	3	regions	region	NOUN
fuelectenerg-900	316	4	can	can	AUX
fuelectenerg-900	316	5	be	be	AUX
fuelectenerg-900	316	6	observed	observe	VERB
fuelectenerg-900	316	7	in	in	ADP
fuelectenerg-900	316	8	the	the	DET
fuelectenerg-900	316	9	diagram	diagram	NOUN
fuelectenerg-900	316	10	.	.	PUNCT
fuelectenerg-900	317	1	in	in	ADP
fuelectenerg-900	317	2	the	the	DET
fuelectenerg-900	317	3	first	first	ADJ
fuelectenerg-900	317	4	region	region	NOUN
fuelectenerg-900	317	5	,	,	PUNCT
fuelectenerg-900	317	6	which	which	PRON
fuelectenerg-900	317	7	corresponds	correspond	VERB
fuelectenerg-900	317	8	to	to	ADP
fuelectenerg-900	317	9	low	low	ADJ
fuelectenerg-900	317	10	values	value	NOUN
fuelectenerg-900	317	11	of	of	ADP
fuelectenerg-900	317	12	ε	ε	PROPN
fuelectenerg-900	317	13	(	(	PUNCT
fuelectenerg-900	317	14	p	p	X
fuelectenerg-900	317	15	/	/	SYM
fuelectenerg-900	317	16	zn	zn	PROPN
fuelectenerg-900	317	17	2	2	NUM
fuelectenerg-900	317	18	<	<	X
fuelectenerg-900	317	19	<	<	X
fuelectenerg-900	317	20	1	1	NUM
fuelectenerg-900	317	21	,	,	PUNCT
fuelectenerg-900	317	22	so	so	SCONJ
fuelectenerg-900	317	23	eq	eq	ADP
fuelectenerg-900	317	24	.	.	PUNCT
fuelectenerg-900	317	25	(	(	PUNCT
fuelectenerg-900	317	26	4	4	X
fuelectenerg-900	317	27	)	)	PUNCT
fuelectenerg-900	317	28	is	be	AUX
fuelectenerg-900	317	29	valid	valid	ADJ
fuelectenerg-900	317	30	)	)	PUNCT
fuelectenerg-900	317	31	,	,	PUNCT
fuelectenerg-900	317	32	the	the	DET
fuelectenerg-900	317	33	resonance	resonance	NOUN
fuelectenerg-900	317	34	frequency	frequency	NOUN
fuelectenerg-900	317	35	is	be	AUX
fuelectenerg-900	317	36	practically	practically	ADV
fuelectenerg-900	317	37	independent	independent	ADJ
fuelectenerg-900	317	38	of	of	ADP
fuelectenerg-900	317	39	tension	tension	NOUN
fuelectenerg-900	317	40	.	.	PUNCT
fuelectenerg-900	318	1	this	this	PRON
fuelectenerg-900	318	2	is	be	AUX
fuelectenerg-900	318	3	the	the	DET
fuelectenerg-900	318	4	bendingdominated	bendingdominate	VERB
fuelectenerg-900	318	5	resonant	resonant	ADJ
fuelectenerg-900	318	6	frequency	frequency	NOUN
fuelectenerg-900	318	7	region	region	NOUN
fuelectenerg-900	318	8	.	.	PUNCT
fuelectenerg-900	319	1	in	in	ADP
fuelectenerg-900	319	2	the	the	DET
fuelectenerg-900	319	3	second	second	ADJ
fuelectenerg-900	319	4	region	region	NOUN
fuelectenerg-900	319	5	the	the	DET
fuelectenerg-900	319	6	increase	increase	NOUN
fuelectenerg-900	319	7	of	of	ADP
fuelectenerg-900	319	8	the	the	DET
fuelectenerg-900	319	9	resonant	resonant	ADJ
fuelectenerg-900	319	10	frequency	frequency	NOUN
fuelectenerg-900	319	11	with	with	ADP
fuelectenerg-900	319	12	the	the	DET
fuelectenerg-900	319	13	applied	apply	VERB
fuelectenerg-900	319	14	strain	strain	NOUN
fuelectenerg-900	319	15	can	can	AUX
fuelectenerg-900	319	16	be	be	AUX
fuelectenerg-900	319	17	clearly	clearly	ADV
fuelectenerg-900	319	18	seen	see	VERB
fuelectenerg-900	319	19	,	,	PUNCT
fuelectenerg-900	319	20	and	and	CCONJ
fuelectenerg-900	319	21	also	also	ADV
fuelectenerg-900	319	22	the	the	DET
fuelectenerg-900	319	23	mentioned	mention	VERB
fuelectenerg-900	319	24	ratio	ratio	NOUN
fuelectenerg-900	319	25	f0(ε)/f0(0	f0(ε)/f0(0	NOUN
fuelectenerg-900	319	26	)	)	PUNCT
fuelectenerg-900	319	27	of	of	ADP
fuelectenerg-900	319	28	3.3	3.3	NUM
fuelectenerg-900	319	29	,	,	PUNCT
fuelectenerg-900	319	30	that	that	PRON
fuelectenerg-900	319	31	corresponds	correspond	VERB
fuelectenerg-900	319	32	to	to	ADP
fuelectenerg-900	319	33	ε=1	ε=1	ADJ
fuelectenerg-900	319	34	%	%	NOUN
fuelectenerg-900	319	35	.	.	PUNCT
fuelectenerg-900	320	1	as	as	SCONJ
fuelectenerg-900	320	2	the	the	DET
fuelectenerg-900	320	3	tension	tension	NOUN
fuelectenerg-900	320	4	increases	increase	VERB
fuelectenerg-900	320	5	,	,	PUNCT
fuelectenerg-900	320	6	it	it	PRON
fuelectenerg-900	320	7	begins	begin	VERB
fuelectenerg-900	320	8	to	to	PART
fuelectenerg-900	320	9	dominantly	dominantly	ADV
fuelectenerg-900	320	10	determine	determine	VERB
fuelectenerg-900	320	11	the	the	DET
fuelectenerg-900	320	12	resonance	resonance	NOUN
fuelectenerg-900	320	13	frequency	frequency	NOUN
fuelectenerg-900	320	14	(	(	PUNCT
fuelectenerg-900	320	15	p	p	X
fuelectenerg-900	320	16	/	/	SYM
fuelectenerg-900	320	17	zn	zn	PROPN
fuelectenerg-900	320	18	2	2	NUM
fuelectenerg-900	320	19	>	>	PUNCT
fuelectenerg-900	320	20	>	>	X
fuelectenerg-900	320	21	1	1	NUM
fuelectenerg-900	320	22	)	)	PUNCT
fuelectenerg-900	320	23	,	,	PUNCT
fuelectenerg-900	320	24	so	so	CCONJ
fuelectenerg-900	320	25	this	this	DET
fuelectenerg-900	320	26	region	region	NOUN
fuelectenerg-900	320	27	is	be	AUX
fuelectenerg-900	320	28	called	call	VERB
fuelectenerg-900	320	29	the	the	DET
fuelectenerg-900	320	30	tensiondominated	tensiondominate	VERB
fuelectenerg-900	320	31	resonance	resonance	NOUN
fuelectenerg-900	320	32	frequency	frequency	NOUN
fuelectenerg-900	320	33	region	region	NOUN
fuelectenerg-900	320	34	.	.	PUNCT
fuelectenerg-900	321	1	also	also	ADV
fuelectenerg-900	321	2	,	,	PUNCT
fuelectenerg-900	321	3	it	it	PRON
fuelectenerg-900	321	4	can	can	AUX
fuelectenerg-900	321	5	be	be	AUX
fuelectenerg-900	321	6	concluded	conclude	VERB
fuelectenerg-900	321	7	from	from	ADP
fuelectenerg-900	321	8	the	the	DET
fuelectenerg-900	321	9	same	same	ADJ
fuelectenerg-900	321	10	diagram	diagram	NOUN
fuelectenerg-900	321	11	that	that	PRON
fuelectenerg-900	321	12	the	the	DET
fuelectenerg-900	321	13	ratio	ratio	NOUN
fuelectenerg-900	321	14	f0(ε)/f0(0	f0(ε)/f0(0	NOUN
fuelectenerg-900	321	15	)	)	PUNCT
fuelectenerg-900	321	16	does	do	AUX
fuelectenerg-900	321	17	not	not	PART
fuelectenerg-900	321	18	depend	depend	VERB
fuelectenerg-900	321	19	on	on	ADP
fuelectenerg-900	321	20	the	the	DET
fuelectenerg-900	321	21	parameters	parameter	NOUN
fuelectenerg-900	321	22	of	of	ADP
fuelectenerg-900	321	23	the	the	DET
fuelectenerg-900	321	24	material	material	NOUN
fuelectenerg-900	321	25	.	.	PUNCT
fuelectenerg-900	322	1	the	the	DET
fuelectenerg-900	322	2	dependence	dependence	NOUN
fuelectenerg-900	322	3	of	of	ADP
fuelectenerg-900	322	4	the	the	DET
fuelectenerg-900	322	5	same	same	ADJ
fuelectenerg-900	322	6	ratio	ratio	NOUN
fuelectenerg-900	322	7	on	on	ADP
fuelectenerg-900	322	8	ε	ε	PROPN
fuelectenerg-900	322	9	is	be	AUX
fuelectenerg-900	322	10	shown	show	VERB
fuelectenerg-900	322	11	in	in	ADP
fuelectenerg-900	322	12	fig	fig	NOUN
fuelectenerg-900	322	13	.	.	PUNCT
fuelectenerg-900	323	1	5b	5b	NOUN
fuelectenerg-900	323	2	for	for	ADP
fuelectenerg-900	323	3	three	three	NUM
fuelectenerg-900	323	4	different	different	ADJ
fuelectenerg-900	323	5	values	value	NOUN
fuelectenerg-900	323	6	of	of	ADP
fuelectenerg-900	323	7	l	l	NOUN
fuelectenerg-900	323	8	/	/	SYM
fuelectenerg-900	323	9	h	h	NOUN
fuelectenerg-900	323	10	(	(	PUNCT
fuelectenerg-900	323	11	20	20	NUM
fuelectenerg-900	323	12	,	,	PUNCT
fuelectenerg-900	323	13	100	100	NUM
fuelectenerg-900	323	14	i	i	NOUN
fuelectenerg-900	323	15	1000	1000	NUM
fuelectenerg-900	323	16	)	)	PUNCT
fuelectenerg-900	323	17	.	.	PUNCT
fuelectenerg-900	324	1	the	the	DET
fuelectenerg-900	324	2	values	value	NOUN
fuelectenerg-900	324	3	of	of	ADP
fuelectenerg-900	324	4	ε	ε	PROPN
fuelectenerg-900	324	5	at	at	ADP
fuelectenerg-900	324	6	which	which	PRON
fuelectenerg-900	324	7	the	the	DET
fuelectenerg-900	324	8	resonance	resonance	NOUN
fuelectenerg-900	324	9	frequency	frequency	NOUN
fuelectenerg-900	324	10	is	be	AUX
fuelectenerg-900	324	11	bending	bend	VERB
fuelectenerg-900	324	12	-	-	PUNCT
fuelectenerg-900	324	13	dominated	dominate	VERB
fuelectenerg-900	324	14	(	(	PUNCT
fuelectenerg-900	324	15	or	or	CCONJ
fuelectenerg-900	324	16	tensiondominated	tensiondominate	VERB
fuelectenerg-900	324	17	)	)	PUNCT
fuelectenerg-900	324	18	depends	depend	VERB
fuelectenerg-900	324	19	on	on	ADP
fuelectenerg-900	324	20	the	the	DET
fuelectenerg-900	324	21	ratio	ratio	NOUN
fuelectenerg-900	324	22	l	l	PROPN
fuelectenerg-900	324	23	/	/	SYM
fuelectenerg-900	324	24	h.	h.	PROPN
fuelectenerg-900	324	25	at	at	ADP
fuelectenerg-900	324	26	higher	high	ADJ
fuelectenerg-900	324	27	l	l	NOUN
fuelectenerg-900	324	28	/	/	SYM
fuelectenerg-900	324	29	h	h	NOUN
fuelectenerg-900	324	30	ratios	ratio	NOUN
fuelectenerg-900	324	31	lower	low	ADJ
fuelectenerg-900	324	32	ε	ε	PROPN
fuelectenerg-900	324	33	values	value	NOUN
fuelectenerg-900	324	34	are	be	AUX
fuelectenerg-900	324	35	required	require	VERB
fuelectenerg-900	324	36	in	in	ADP
fuelectenerg-900	324	37	order	order	NOUN
fuelectenerg-900	324	38	to	to	PART
fuelectenerg-900	324	39	attain	attain	VERB
fuelectenerg-900	324	40	a	a	DET
fuelectenerg-900	324	41	certain	certain	ADJ
fuelectenerg-900	324	42	factor	factor	NOUN
fuelectenerg-900	324	43	of	of	ADP
fuelectenerg-900	324	44	the	the	DET
fuelectenerg-900	324	45	resonance	resonance	NOUN
fuelectenerg-900	324	46	frequency	frequency	NOUN
fuelectenerg-900	324	47	change	change	NOUN
fuelectenerg-900	324	48	,	,	PUNCT
fuelectenerg-900	324	49	i.e.	i.e.	X
fuelectenerg-900	324	50	the	the	DET
fuelectenerg-900	324	51	same	same	ADJ
fuelectenerg-900	324	52	strain	strain	NOUN
fuelectenerg-900	324	53	applied	apply	VERB
fuelectenerg-900	324	54	in	in	ADP
fuelectenerg-900	324	55	a	a	DET
fuelectenerg-900	324	56	resonator	resonator	NOUN
fuelectenerg-900	324	57	of	of	ADP
fuelectenerg-900	324	58	a	a	DET
fuelectenerg-900	324	59	higher	high	ADJ
fuelectenerg-900	324	60	l	l	NOUN
fuelectenerg-900	324	61	/	/	SYM
fuelectenerg-900	324	62	h	h	NOUN
fuelectenerg-900	324	63	ratio	ratio	NOUN
fuelectenerg-900	324	64	yields	yield	VERB
fuelectenerg-900	324	65	a	a	DET
fuelectenerg-900	324	66	higher	high	ADJ
fuelectenerg-900	324	67	f0(ε)/f0(0	f0(ε)/f0(0	NOUN
fuelectenerg-900	324	68	)	)	PUNCT
fuelectenerg-900	324	69	ratio	ratio	NOUN
fuelectenerg-900	324	70	.	.	PUNCT
fuelectenerg-900	325	1	for	for	ADP
fuelectenerg-900	325	2	fixed	fix	VERB
fuelectenerg-900	325	3	l	l	PROPN
fuelectenerg-900	325	4	/	/	SYM
fuelectenerg-900	325	5	h	h	NOUN
fuelectenerg-900	325	6	,	,	PUNCT
fuelectenerg-900	325	7	the	the	DET
fuelectenerg-900	325	8	maximum	maximum	ADJ
fuelectenerg-900	325	9	achievable	achievable	ADJ
fuelectenerg-900	325	10	resonance	resonance	NOUN
fuelectenerg-900	325	11	frequency	frequency	NOUN
fuelectenerg-900	325	12	depends	depend	VERB
fuelectenerg-900	325	13	on	on	ADP
fuelectenerg-900	325	14	the	the	DET
fuelectenerg-900	325	15	maximal	maximal	ADJ
fuelectenerg-900	325	16	possible	possible	ADJ
fuelectenerg-900	325	17	strain	strain	NOUN
fuelectenerg-900	325	18	(	(	PUNCT
fuelectenerg-900	325	19	it	it	PRON
fuelectenerg-900	325	20	depends	depend	VERB
fuelectenerg-900	325	21	on	on	ADP
fuelectenerg-900	325	22	the	the	DET
fuelectenerg-900	325	23	resonator	resonator	NOUN
fuelectenerg-900	325	24	's	's	PART
fuelectenerg-900	325	25	material	material	NOUN
fuelectenerg-900	325	26	properties	property	NOUN
fuelectenerg-900	325	27	and	and	CCONJ
fuelectenerg-900	325	28	the	the	DET
fuelectenerg-900	325	29	maximum	maximum	ADJ
fuelectenerg-900	325	30	value	value	NOUN
fuelectenerg-900	325	31	of	of	ADP
fuelectenerg-900	325	32	the	the	DET
fuelectenerg-900	325	33	control	control	NOUN
fuelectenerg-900	325	34	voltage	voltage	NOUN
fuelectenerg-900	325	35	in	in	ADP
fuelectenerg-900	325	36	the	the	DET
fuelectenerg-900	325	37	given	give	VERB
fuelectenerg-900	325	38	application	application	NOUN
fuelectenerg-900	325	39	)	)	PUNCT
fuelectenerg-900	325	40	.	.	PUNCT
fuelectenerg-900	326	1	rf	rf	PROPN
fuelectenerg-900	326	2	mems	mem	NOUN
fuelectenerg-900	326	3	/	/	SYM
fuelectenerg-900	326	4	nems	nem	NOUN
fuelectenerg-900	326	5	resonators	resonator	NOUN
fuelectenerg-900	326	6	for	for	ADP
fuelectenerg-900	326	7	wireless	wireless	ADJ
fuelectenerg-900	326	8	communication	communication	NOUN
fuelectenerg-900	326	9	systems	system	NOUN
fuelectenerg-900	326	10	and	and	CCONJ
fuelectenerg-900	326	11	adsorption	adsorption	NOUN
fuelectenerg-900	326	12	-	-	PUNCT
fuelectenerg-900	326	13	desorption	desorption	NOUN
fuelectenerg-900	326	14	phase	phase	NOUN
fuelectenerg-900	326	15	noise	noise	NOUN
fuelectenerg-900	326	16	361	361	NUM
fuelectenerg-900	326	17	fig	fig	NOUN
fuelectenerg-900	326	18	.	.	PUNCT
fuelectenerg-900	327	1	5	5	NUM
fuelectenerg-900	327	2	doubly	doubly	ADV
fuelectenerg-900	327	3	clamped	clamp	VERB
fuelectenerg-900	327	4	beam	beam	NOUN
fuelectenerg-900	327	5	resonators	resonator	NOUN
fuelectenerg-900	327	6	oscillating	oscillate	VERB
fuelectenerg-900	327	7	in	in	ADP
fuelectenerg-900	327	8	the	the	DET
fuelectenerg-900	327	9	first	first	ADJ
fuelectenerg-900	327	10	flexural	flexural	ADJ
fuelectenerg-900	327	11	mode	mode	NOUN
fuelectenerg-900	327	12	:	:	PUNCT
fuelectenerg-900	327	13	a	a	X
fuelectenerg-900	327	14	)	)	PUNCT
fuelectenerg-900	327	15	the	the	DET
fuelectenerg-900	327	16	dependence	dependence	NOUN
fuelectenerg-900	327	17	of	of	ADP
fuelectenerg-900	327	18	the	the	DET
fuelectenerg-900	327	19	resonance	resonance	NOUN
fuelectenerg-900	327	20	frequency	frequency	NOUN
fuelectenerg-900	327	21	of	of	ADP
fuelectenerg-900	327	22	beams	beam	NOUN
fuelectenerg-900	327	23	(	(	PUNCT
fuelectenerg-900	327	24	l	l	NOUN
fuelectenerg-900	327	25	/	/	SYM
fuelectenerg-900	327	26	h=60	h=60	NOUN
fuelectenerg-900	327	27	)	)	PUNCT
fuelectenerg-900	327	28	made	make	VERB
fuelectenerg-900	327	29	of	of	ADP
fuelectenerg-900	327	30	various	various	ADJ
fuelectenerg-900	327	31	semiconductor	semiconductor	NOUN
fuelectenerg-900	327	32	materials	material	NOUN
fuelectenerg-900	327	33	commonly	commonly	ADV
fuelectenerg-900	327	34	used	use	VERB
fuelectenerg-900	327	35	in	in	ADP
fuelectenerg-900	327	36	mems	mem	NOUN
fuelectenerg-900	327	37	,	,	PUNCT
fuelectenerg-900	327	38	on	on	ADP
fuelectenerg-900	327	39	the	the	DET
fuelectenerg-900	327	40	applied	apply	VERB
fuelectenerg-900	327	41	uniaxial	uniaxial	ADJ
fuelectenerg-900	327	42	tensile	tensile	NOUN
fuelectenerg-900	327	43	strain	strain	NOUN
fuelectenerg-900	327	44	,	,	PUNCT
fuelectenerg-900	327	45	b	b	X
fuelectenerg-900	327	46	)	)	PUNCT
fuelectenerg-900	327	47	the	the	DET
fuelectenerg-900	327	48	dependence	dependence	NOUN
fuelectenerg-900	327	49	of	of	ADP
fuelectenerg-900	327	50	the	the	DET
fuelectenerg-900	327	51	ratio	ratio	NOUN
fuelectenerg-900	327	52	of	of	ADP
fuelectenerg-900	327	53	the	the	DET
fuelectenerg-900	327	54	resonance	resonance	NOUN
fuelectenerg-900	327	55	frequency	frequency	NOUN
fuelectenerg-900	327	56	of	of	ADP
fuelectenerg-900	327	57	a	a	DET
fuelectenerg-900	327	58	beam	beam	NOUN
fuelectenerg-900	327	59	under	under	ADP
fuelectenerg-900	327	60	the	the	DET
fuelectenerg-900	327	61	tension	tension	NOUN
fuelectenerg-900	327	62	(	(	PUNCT
fuelectenerg-900	327	63	i.e.	i.e.	X
fuelectenerg-900	327	64	axial	axial	ADJ
fuelectenerg-900	327	65	strain	strain	NOUN
fuelectenerg-900	327	66	)	)	PUNCT
fuelectenerg-900	327	67	and	and	CCONJ
fuelectenerg-900	327	68	the	the	DET
fuelectenerg-900	327	69	resonance	resonance	NOUN
fuelectenerg-900	327	70	frequency	frequency	NOUN
fuelectenerg-900	327	71	in	in	ADP
fuelectenerg-900	327	72	the	the	DET
fuelectenerg-900	327	73	absence	absence	NOUN
fuelectenerg-900	327	74	of	of	ADP
fuelectenerg-900	327	75	the	the	DET
fuelectenerg-900	327	76	tension	tension	NOUN
fuelectenerg-900	327	77	,	,	PUNCT
fuelectenerg-900	327	78	on	on	ADP
fuelectenerg-900	327	79	strain	strain	NOUN
fuelectenerg-900	327	80	,	,	PUNCT
fuelectenerg-900	327	81	for	for	ADP
fuelectenerg-900	327	82	three	three	NUM
fuelectenerg-900	327	83	different	different	ADJ
fuelectenerg-900	327	84	values	value	NOUN
fuelectenerg-900	327	85	of	of	ADP
fuelectenerg-900	327	86	l	l	PROPN
fuelectenerg-900	327	87	/	/	SYM
fuelectenerg-900	327	88	h.	h.	PROPN
fuelectenerg-900	327	89	based	base	VERB
fuelectenerg-900	327	90	on	on	ADP
fuelectenerg-900	327	91	the	the	DET
fuelectenerg-900	327	92	presented	present	VERB
fuelectenerg-900	327	93	analysis	analysis	NOUN
fuelectenerg-900	327	94	and	and	CCONJ
fuelectenerg-900	327	95	results	result	NOUN
fuelectenerg-900	327	96	from	from	ADP
fuelectenerg-900	327	97	the	the	DET
fuelectenerg-900	327	98	literature	literature	NOUN
fuelectenerg-900	327	99	,	,	PUNCT
fuelectenerg-900	327	100	the	the	DET
fuelectenerg-900	327	101	following	follow	VERB
fuelectenerg-900	327	102	conclusions	conclusion	NOUN
fuelectenerg-900	327	103	can	can	AUX
fuelectenerg-900	327	104	be	be	AUX
fuelectenerg-900	327	105	made	make	VERB
fuelectenerg-900	327	106	:	:	PUNCT
fuelectenerg-900	328	1	1	1	X
fuelectenerg-900	328	2	.	.	PUNCT
fuelectenerg-900	329	1	in	in	ADP
fuelectenerg-900	329	2	order	order	NOUN
fuelectenerg-900	329	3	to	to	PART
fuelectenerg-900	329	4	achieve	achieve	VERB
fuelectenerg-900	329	5	nominal	nominal	ADJ
fuelectenerg-900	329	6	resonance	resonance	NOUN
fuelectenerg-900	329	7	frequencies	frequency	NOUN
fuelectenerg-900	329	8	in	in	ADP
fuelectenerg-900	329	9	the	the	DET
fuelectenerg-900	329	10	ghz	ghz	NOUN
fuelectenerg-900	329	11	range	range	NOUN
fuelectenerg-900	329	12	,	,	PUNCT
fuelectenerg-900	329	13	the	the	DET
fuelectenerg-900	329	14	resonator	resonator	NOUN
fuelectenerg-900	329	15	needs	need	VERB
fuelectenerg-900	329	16	to	to	PART
fuelectenerg-900	329	17	be	be	AUX
fuelectenerg-900	329	18	made	make	VERB
fuelectenerg-900	329	19	of	of	ADP
fuelectenerg-900	329	20	a	a	DET
fuelectenerg-900	329	21	material	material	NOUN
fuelectenerg-900	329	22	with	with	ADP
fuelectenerg-900	329	23	high	high	ADJ
fuelectenerg-900	329	24	e	e	PROPN
fuelectenerg-900	329	25	/	/	SYM
fuelectenerg-900	329	26	ρ	ρ	PROPN
fuelectenerg-900	329	27	ratio	ratio	NOUN
fuelectenerg-900	329	28	(	(	PUNCT
fuelectenerg-900	329	29	i.e.	i.e.	X
fuelectenerg-900	329	30	the	the	DET
fuelectenerg-900	329	31	material	material	NOUN
fuelectenerg-900	329	32	should	should	AUX
fuelectenerg-900	329	33	be	be	AUX
fuelectenerg-900	329	34	stiff	stiff	ADJ
fuelectenerg-900	329	35	and/or	and/or	CCONJ
fuelectenerg-900	329	36	light	light	ADJ
fuelectenerg-900	329	37	)	)	PUNCT
fuelectenerg-900	329	38	;	;	PUNCT
fuelectenerg-900	329	39	also	also	ADV
fuelectenerg-900	329	40	,	,	PUNCT
fuelectenerg-900	329	41	the	the	DET
fuelectenerg-900	329	42	resonant	resonant	ADJ
fuelectenerg-900	329	43	structure	structure	NOUN
fuelectenerg-900	329	44	needs	need	VERB
fuelectenerg-900	329	45	to	to	PART
fuelectenerg-900	329	46	be	be	AUX
fuelectenerg-900	329	47	of	of	ADP
fuelectenerg-900	329	48	nanometer	nanometer	NOUN
fuelectenerg-900	329	49	dimensions	dimension	NOUN
fuelectenerg-900	329	50	(	(	PUNCT
fuelectenerg-900	329	51	the	the	DET
fuelectenerg-900	329	52	domain	domain	NOUN
fuelectenerg-900	329	53	of	of	ADP
fuelectenerg-900	329	54	nems	nems	PROPN
fuelectenerg-900	329	55	technologies	technology	NOUN
fuelectenerg-900	329	56	)	)	PUNCT
fuelectenerg-900	329	57	,	,	PUNCT
fuelectenerg-900	329	58	2	2	X
fuelectenerg-900	329	59	.	.	X
fuelectenerg-900	330	1	for	for	SCONJ
fuelectenerg-900	330	2	a	a	DET
fuelectenerg-900	330	3	wide	wide	ADJ
fuelectenerg-900	330	4	frequency	frequency	NOUN
fuelectenerg-900	330	5	tuning	tuning	NOUN
fuelectenerg-900	330	6	range	range	NOUN
fuelectenerg-900	330	7	to	to	PART
fuelectenerg-900	330	8	be	be	AUX
fuelectenerg-900	330	9	achieved	achieve	VERB
fuelectenerg-900	330	10	by	by	ADP
fuelectenerg-900	330	11	application	application	NOUN
fuelectenerg-900	330	12	of	of	ADP
fuelectenerg-900	330	13	tensile	tensile	NOUN
fuelectenerg-900	330	14	strain	strain	NOUN
fuelectenerg-900	330	15	,	,	PUNCT
fuelectenerg-900	330	16	the	the	DET
fuelectenerg-900	330	17	material	material	NOUN
fuelectenerg-900	330	18	needs	need	VERB
fuelectenerg-900	330	19	to	to	PART
fuelectenerg-900	330	20	have	have	VERB
fuelectenerg-900	330	21	a	a	DET
fuelectenerg-900	330	22	high	high	ADJ
fuelectenerg-900	330	23	yield	yield	NOUN
fuelectenerg-900	330	24	strength	strength	NOUN
fuelectenerg-900	330	25	(	(	PUNCT
fuelectenerg-900	330	26	i.e.	i.e.	X
fuelectenerg-900	330	27	to	to	PART
fuelectenerg-900	330	28	withstand	withstand	VERB
fuelectenerg-900	330	29	a	a	DET
fuelectenerg-900	330	30	high	high	ADJ
fuelectenerg-900	330	31	strain	strain	NOUN
fuelectenerg-900	330	32	)	)	PUNCT
fuelectenerg-900	330	33	;	;	PUNCT
fuelectenerg-900	330	34	it	it	PRON
fuelectenerg-900	330	35	is	be	AUX
fuelectenerg-900	330	36	also	also	ADV
fuelectenerg-900	330	37	necessary	necessary	ADJ
fuelectenerg-900	330	38	for	for	SCONJ
fuelectenerg-900	330	39	the	the	DET
fuelectenerg-900	330	40	l	l	NOUN
fuelectenerg-900	330	41	/	/	SYM
fuelectenerg-900	330	42	h	h	NOUN
fuelectenerg-900	330	43	ratio	ratio	NOUN
fuelectenerg-900	330	44	to	to	PART
fuelectenerg-900	330	45	be	be	AUX
fuelectenerg-900	330	46	as	as	ADV
fuelectenerg-900	330	47	high	high	ADJ
fuelectenerg-900	330	48	as	as	ADP
fuelectenerg-900	330	49	possible	possible	ADJ
fuelectenerg-900	330	50	,	,	PUNCT
fuelectenerg-900	330	51	3	3	X
fuelectenerg-900	330	52	.	.	NOUN
fuelectenerg-900	330	53	high	high	ADJ
fuelectenerg-900	330	54	resonance	resonance	NOUN
fuelectenerg-900	330	55	frequencies	frequency	NOUN
fuelectenerg-900	330	56	of	of	ADP
fuelectenerg-900	330	57	mems	mem	NOUN
fuelectenerg-900	330	58	resonators	resonator	NOUN
fuelectenerg-900	330	59	are	be	AUX
fuelectenerg-900	330	60	typically	typically	ADV
fuelectenerg-900	330	61	achieved	achieve	VERB
fuelectenerg-900	330	62	in	in	ADP
fuelectenerg-900	330	63	structures	structure	NOUN
fuelectenerg-900	330	64	of	of	ADP
fuelectenerg-900	330	65	high	high	ADJ
fuelectenerg-900	330	66	mechanical	mechanical	ADJ
fuelectenerg-900	330	67	stiffness	stiffness	NOUN
fuelectenerg-900	330	68	,	,	PUNCT
fuelectenerg-900	330	69	which	which	PRON
fuelectenerg-900	330	70	makes	make	VERB
fuelectenerg-900	330	71	frequency	frequency	NOUN
fuelectenerg-900	330	72	tuning	tuning	NOUN
fuelectenerg-900	330	73	difficult	difficult	ADJ
fuelectenerg-900	330	74	.	.	PUNCT
fuelectenerg-900	331	1	nems	nems	PROPN
fuelectenerg-900	331	2	resonators	resonator	NOUN
fuelectenerg-900	331	3	,	,	PUNCT
fuelectenerg-900	331	4	however	however	ADV
fuelectenerg-900	331	5	,	,	PUNCT
fuelectenerg-900	331	6	achieve	achieve	VERB
fuelectenerg-900	331	7	high	high	ADJ
fuelectenerg-900	331	8	resonance	resonance	NOUN
fuelectenerg-900	331	9	frequencies	frequency	NOUN
fuelectenerg-900	331	10	while	while	SCONJ
fuelectenerg-900	331	11	having	have	VERB
fuelectenerg-900	331	12	the	the	DET
fuelectenerg-900	331	13	mechanical	mechanical	ADJ
fuelectenerg-900	331	14	compliance	compliance	NOUN
fuelectenerg-900	331	15	needed	need	VERB
fuelectenerg-900	331	16	for	for	ADP
fuelectenerg-900	331	17	tunability	tunability	NOUN
fuelectenerg-900	331	18	[	[	X
fuelectenerg-900	331	19	68	68	NUM
fuelectenerg-900	331	20	]	]	PUNCT
fuelectenerg-900	331	21	.	.	PUNCT
fuelectenerg-900	332	1	2.3	2.3	NUM
fuelectenerg-900	332	2	.	.	PUNCT
fuelectenerg-900	332	3	transition	transition	NOUN
fuelectenerg-900	332	4	from	from	ADP
fuelectenerg-900	332	5	mems	mem	NOUN
fuelectenerg-900	332	6	to	to	ADP
fuelectenerg-900	332	7	nems	nem	NOUN
fuelectenerg-900	332	8	resonators	resonator	NOUN
fuelectenerg-900	332	9	.	.	PUNCT
fuelectenerg-900	333	1	rf	rf	VERB
fuelectenerg-900	333	2	mems	mem	NOUN
fuelectenerg-900	333	3	/	/	SYM
fuelectenerg-900	333	4	nems	nem	NOUN
fuelectenerg-900	333	5	dimensions	dimension	NOUN
fuelectenerg-900	333	6	scalling	scalle	VERB
fuelectenerg-900	333	7	challenges	challenge	VERB
fuelectenerg-900	333	8	nanoelectromechanical	nanoelectromechanical	ADJ
fuelectenerg-900	333	9	(	(	PUNCT
fuelectenerg-900	333	10	nems	nem	NOUN
fuelectenerg-900	333	11	)	)	PUNCT
fuelectenerg-900	333	12	systems	system	NOUN
fuelectenerg-900	333	13	contain	contain	VERB
fuelectenerg-900	333	14	mechanical	mechanical	ADJ
fuelectenerg-900	333	15	features	feature	NOUN
fuelectenerg-900	333	16	whose	whose	DET
fuelectenerg-900	333	17	at	at	ADP
fuelectenerg-900	333	18	least	least	ADV
fuelectenerg-900	333	19	one	one	NUM
fuelectenerg-900	333	20	dimension	dimension	NOUN
fuelectenerg-900	333	21	is	be	AUX
fuelectenerg-900	333	22	under	under	ADP
fuelectenerg-900	333	23	1	1	NUM
fuelectenerg-900	333	24	micrometer	micrometer	NOUN
fuelectenerg-900	333	25	.	.	PUNCT
fuelectenerg-900	334	1	since	since	SCONJ
fuelectenerg-900	334	2	the	the	DET
fuelectenerg-900	334	3	year	year	NOUN
fuelectenerg-900	334	4	2000	2000	NUM
fuelectenerg-900	334	5	a	a	DET
fuelectenerg-900	334	6	significant	significant	ADJ
fuelectenerg-900	334	7	advance	advance	NOUN
fuelectenerg-900	334	8	has	have	AUX
fuelectenerg-900	334	9	been	be	AUX
fuelectenerg-900	334	10	achieved	achieve	VERB
fuelectenerg-900	334	11	in	in	ADP
fuelectenerg-900	334	12	the	the	DET
fuelectenerg-900	334	13	development	development	NOUN
fuelectenerg-900	334	14	of	of	ADP
fuelectenerg-900	334	15	nems	nem	NOUN
fuelectenerg-900	334	16	resonators	resonator	NOUN
fuelectenerg-900	334	17	.	.	PUNCT
fuelectenerg-900	335	1	due	due	ADP
fuelectenerg-900	335	2	to	to	ADP
fuelectenerg-900	335	3	unique	unique	ADJ
fuelectenerg-900	335	4	mechanical	mechanical	ADJ
fuelectenerg-900	335	5	properties	property	NOUN
fuelectenerg-900	335	6	,	,	PUNCT
fuelectenerg-900	335	7	nems	nem	NOUN
fuelectenerg-900	335	8	resonators	resonator	NOUN
fuelectenerg-900	335	9	provide	provide	VERB
fuelectenerg-900	335	10	a	a	DET
fuelectenerg-900	335	11	promising	promising	ADJ
fuelectenerg-900	335	12	basis	basis	NOUN
fuelectenerg-900	335	13	for	for	ADP
fuelectenerg-900	335	14	future	future	ADJ
fuelectenerg-900	335	15	ultrafast	ultrafast	ADJ
fuelectenerg-900	335	16	communication	communication	NOUN
fuelectenerg-900	335	17	systems	system	NOUN
fuelectenerg-900	335	18	,	,	PUNCT
fuelectenerg-900	335	19	highly	highly	ADV
fuelectenerg-900	335	20	-	-	PUNCT
fuelectenerg-900	335	21	sensitive	sensitive	ADJ
fuelectenerg-900	335	22	force	force	NOUN
fuelectenerg-900	335	23	and	and	CCONJ
fuelectenerg-900	335	24	mass	mass	ADJ
fuelectenerg-900	335	25	sensors	sensor	NOUN
fuelectenerg-900	335	26	,	,	PUNCT
fuelectenerg-900	335	27	biomedicine	biomedicine	NOUN
fuelectenerg-900	335	28	etc	etc	X
fuelectenerg-900	335	29	.	.	PUNCT
fuelectenerg-900	336	1	a	a	DET
fuelectenerg-900	336	2	majority	majority	NOUN
fuelectenerg-900	336	3	of	of	ADP
fuelectenerg-900	336	4	nems	nem	NOUN
fuelectenerg-900	336	5	resonators	resonator	NOUN
fuelectenerg-900	336	6	is	be	AUX
fuelectenerg-900	336	7	in	in	ADP
fuelectenerg-900	336	8	the	the	DET
fuelectenerg-900	336	9	shape	shape	NOUN
fuelectenerg-900	336	10	of	of	ADP
fuelectenerg-900	336	11	a	a	DET
fuelectenerg-900	336	12	nanoscale	nanoscale	NOUN
fuelectenerg-900	336	13	beam	beam	NOUN
fuelectenerg-900	336	14	(	(	PUNCT
fuelectenerg-900	336	15	doubly	doubly	ADV
fuelectenerg-900	336	16	-	-	PUNCT
fuelectenerg-900	336	17	clamped	clamp	VERB
fuelectenerg-900	336	18	,	,	PUNCT
fuelectenerg-900	336	19	cantilever	cantilever	NOUN
fuelectenerg-900	336	20	or	or	CCONJ
fuelectenerg-900	336	21	free	free	ADV
fuelectenerg-900	336	22	-	-	PUNCT
fuelectenerg-900	336	23	standing	standing	NOUN
fuelectenerg-900	336	24	)	)	PUNCT
fuelectenerg-900	336	25	made	make	VERB
fuelectenerg-900	336	26	of	of	ADP
fuelectenerg-900	336	27	si	si	NOUN
fuelectenerg-900	336	28	or	or	CCONJ
fuelectenerg-900	336	29	sic	sic	ADJ
fuelectenerg-900	336	30	,	,	PUNCT
fuelectenerg-900	336	31	that	that	SCONJ
fuelectenerg-900	336	32	oscillates	oscillate	NOUN
fuelectenerg-900	336	33	in	in	ADP
fuelectenerg-900	336	34	response	response	NOUN
fuelectenerg-900	336	35	to	to	ADP
fuelectenerg-900	336	36	an	an	DET
fuelectenerg-900	336	37	applied	apply	VERB
fuelectenerg-900	336	38	external	external	ADJ
fuelectenerg-900	336	39	force	force	NOUN
fuelectenerg-900	336	40	[	[	X
fuelectenerg-900	336	41	66	66	NUM
fuelectenerg-900	336	42	,	,	PUNCT
fuelectenerg-900	336	43	69	69	NUM
fuelectenerg-900	336	44	-	-	SYM
fuelectenerg-900	336	45	72	72	NUM
fuelectenerg-900	336	46	]	]	PUNCT
fuelectenerg-900	336	47	.	.	PUNCT
fuelectenerg-900	337	1	their	their	PRON
fuelectenerg-900	337	2	length	length	NOUN
fuelectenerg-900	337	3	is	be	AUX
fuelectenerg-900	337	4	typically	typically	ADV
fuelectenerg-900	337	5	between	between	ADP
fuelectenerg-900	337	6	1	1	NUM
fuelectenerg-900	337	7	-	-	SYM
fuelectenerg-900	337	8	20	20	NUM
fuelectenerg-900	337	9	μm	μm	NOUN
fuelectenerg-900	337	10	,	,	PUNCT
fuelectenerg-900	337	11	while	while	SCONJ
fuelectenerg-900	337	12	the	the	DET
fuelectenerg-900	337	13	thickness	thickness	NOUN
fuelectenerg-900	337	14	and	and	CCONJ
fuelectenerg-900	337	15	width	width	NOUN
fuelectenerg-900	337	16	are	be	AUX
fuelectenerg-900	337	17	smaller	small	ADJ
fuelectenerg-900	337	18	than	than	ADP
fuelectenerg-900	337	19	1	1	NUM
fuelectenerg-900	337	20	μm	μm	NOUN
fuelectenerg-900	337	21	.	.	PUNCT
fuelectenerg-900	338	1	the	the	DET
fuelectenerg-900	338	2	effective	effective	ADJ
fuelectenerg-900	338	3	mass	mass	NOUN
fuelectenerg-900	338	4	of	of	ADP
fuelectenerg-900	338	5	nems	nem	NOUN
fuelectenerg-900	338	6	is	be	AUX
fuelectenerg-900	338	7	usually	usually	ADV
fuelectenerg-900	338	8	10	10	NUM
fuelectenerg-900	338	9	-14	-14	SYM
fuelectenerg-900	338	10	g	g	NOUN
fuelectenerg-900	338	11	,	,	PUNCT
fuelectenerg-900	338	12	and	and	CCONJ
fuelectenerg-900	338	13	typical	typical	ADJ
fuelectenerg-900	338	14	resonance	resonance	NOUN
fuelectenerg-900	338	15	frequencies	frequency	NOUN
fuelectenerg-900	338	16	are	be	AUX
fuelectenerg-900	338	17	in	in	ADP
fuelectenerg-900	338	18	the	the	DET
fuelectenerg-900	338	19	range	range	NOUN
fuelectenerg-900	338	20	between	between	ADP
fuelectenerg-900	338	21	1	1	NUM
fuelectenerg-900	338	22	mhz	mhz	NOUN
fuelectenerg-900	338	23	and	and	CCONJ
fuelectenerg-900	338	24	10	10	NUM
fuelectenerg-900	338	25	ghz	ghz	NOUN
fuelectenerg-900	338	26	[	[	X
fuelectenerg-900	338	27	70	70	NUM
fuelectenerg-900	338	28	]	]	PUNCT
fuelectenerg-900	338	29	,	,	PUNCT
fuelectenerg-900	338	30	while	while	SCONJ
fuelectenerg-900	338	31	the	the	DET
fuelectenerg-900	338	32	dissipated	dissipate	VERB
fuelectenerg-900	338	33	power	power	NOUN
fuelectenerg-900	338	34	can	can	AUX
fuelectenerg-900	338	35	be	be	AUX
fuelectenerg-900	338	36	as	as	ADV
fuelectenerg-900	338	37	low	low	ADJ
fuelectenerg-900	338	38	as	as	ADP
fuelectenerg-900	338	39	10	10	NUM
fuelectenerg-900	338	40	-17	-17	PROPN
fuelectenerg-900	338	41	w.	w.	PROPN
fuelectenerg-900	338	42	362	362	NUM
fuelectenerg-900	338	43	i.	i.	PROPN
fuelectenerg-900	338	44	jokić	jokić	PROPN
fuelectenerg-900	338	45	,	,	PUNCT
fuelectenerg-900	338	46	m.	m.	NOUN
fuelectenerg-900	338	47	frantlović	frantlović	NOUN
fuelectenerg-900	338	48	,	,	PUNCT
fuelectenerg-900	338	49	z.	z.	PROPN
fuelectenerg-900	338	50	djurić	djurić	PROPN
fuelectenerg-900	338	51	,	,	PUNCT
fuelectenerg-900	338	52	m.	m.	NOUN
fuelectenerg-900	338	53	l.	l.	PROPN
fuelectenerg-900	338	54	dukić	dukić	PROPN
fuelectenerg-900	338	55	the	the	DET
fuelectenerg-900	338	56	first	first	ADJ
fuelectenerg-900	338	57	rf	rf	PRON
fuelectenerg-900	338	58	si	si	NOUN
fuelectenerg-900	338	59	resonator	resonator	NOUN
fuelectenerg-900	338	60	of	of	ADP
fuelectenerg-900	338	61	nanoscale	nanoscale	NOUN
fuelectenerg-900	338	62	dimensions	dimension	NOUN
fuelectenerg-900	338	63	(	(	PUNCT
fuelectenerg-900	338	64	7.7	7.7	NUM
fuelectenerg-900	338	65	μm	μm	NOUN
fuelectenerg-900	338	66			NOUN
fuelectenerg-900	338	67	330	330	NUM
fuelectenerg-900	338	68	nm	nm	NOUN
fuelectenerg-900	338	69			PROPN
fuelectenerg-900	338	70	800	800	NUM
fuelectenerg-900	338	71	nm	nm	NOUN
fuelectenerg-900	338	72	,	,	PUNCT
fuelectenerg-900	338	73	beam	beam	NOUN
fuelectenerg-900	338	74	shape	shape	NOUN
fuelectenerg-900	338	75	)	)	PUNCT
fuelectenerg-900	338	76	,	,	PUNCT
fuelectenerg-900	338	77	reported	report	VERB
fuelectenerg-900	338	78	in	in	ADP
fuelectenerg-900	338	79	1996	1996	NUM
fuelectenerg-900	338	80	,	,	PUNCT
fuelectenerg-900	338	81	had	have	VERB
fuelectenerg-900	338	82	the	the	DET
fuelectenerg-900	338	83	fundamental	fundamental	ADJ
fuelectenerg-900	338	84	resonance	resonance	NOUN
fuelectenerg-900	338	85	frequency	frequency	NOUN
fuelectenerg-900	338	86	around	around	ADP
fuelectenerg-900	338	87	70	70	NUM
fuelectenerg-900	338	88	mhz	mhz	NOUN
fuelectenerg-900	338	89	and	and	CCONJ
fuelectenerg-900	338	90	q=1.8·10	q=1.8·10	NOUN
fuelectenerg-900	338	91	4	4	NUM
fuelectenerg-900	338	92	[	[	X
fuelectenerg-900	338	93	69	69	NUM
fuelectenerg-900	338	94	]	]	PUNCT
fuelectenerg-900	338	95	.	.	PUNCT
fuelectenerg-900	339	1	later	later	ADV
fuelectenerg-900	339	2	the	the	DET
fuelectenerg-900	339	3	silicon	silicon	NOUN
fuelectenerg-900	339	4	nems	nem	NOUN
fuelectenerg-900	339	5	beam	beam	VERB
fuelectenerg-900	339	6	resonator	resonator	NOUN
fuelectenerg-900	339	7	fundamental	fundamental	ADJ
fuelectenerg-900	339	8	frequency	frequency	NOUN
fuelectenerg-900	339	9	of	of	ADP
fuelectenerg-900	339	10	380	380	NUM
fuelectenerg-900	339	11	mhz	mhz	NOUN
fuelectenerg-900	339	12	was	be	AUX
fuelectenerg-900	339	13	reached	reach	VERB
fuelectenerg-900	339	14	,	,	PUNCT
fuelectenerg-900	339	15	with	with	ADP
fuelectenerg-900	339	16	q	q	PROPN
fuelectenerg-900	339	17	of	of	ADP
fuelectenerg-900	339	18	the	the	DET
fuelectenerg-900	339	19	order	order	NOUN
fuelectenerg-900	339	20	of	of	ADP
fuelectenerg-900	339	21	1000	1000	NUM
fuelectenerg-900	339	22	at	at	ADP
fuelectenerg-900	339	23	room	room	NOUN
fuelectenerg-900	339	24	temperatures	temperature	NOUN
fuelectenerg-900	339	25	[	[	X
fuelectenerg-900	339	26	73	73	NUM
fuelectenerg-900	339	27	]	]	PUNCT
fuelectenerg-900	339	28	.	.	PUNCT
fuelectenerg-900	340	1	first	first	ADJ
fuelectenerg-900	340	2	nems	nems	PROPN
fuelectenerg-900	340	3	resonators	resonator	VERB
fuelectenerg-900	340	4	whose	whose	DET
fuelectenerg-900	340	5	resonance	resonance	NOUN
fuelectenerg-900	340	6	frequency	frequency	NOUN
fuelectenerg-900	340	7	exceeded	exceed	VERB
fuelectenerg-900	340	8	1	1	NUM
fuelectenerg-900	340	9	ghz	ghz	NOUN
fuelectenerg-900	340	10	were	be	AUX
fuelectenerg-900	340	11	sic	sic	ADJ
fuelectenerg-900	340	12	beams	beam	NOUN
fuelectenerg-900	340	13	[	[	X
fuelectenerg-900	340	14	74	74	NUM
fuelectenerg-900	340	15	]	]	PUNCT
fuelectenerg-900	340	16	.	.	PUNCT
fuelectenerg-900	341	1	dimensions	dimension	NOUN
fuelectenerg-900	341	2	of	of	ADP
fuelectenerg-900	341	3	one	one	NUM
fuelectenerg-900	341	4	of	of	ADP
fuelectenerg-900	341	5	them	they	PRON
fuelectenerg-900	341	6	,	,	PUNCT
fuelectenerg-900	341	7	with	with	ADP
fuelectenerg-900	341	8	the	the	DET
fuelectenerg-900	341	9	resonance	resonance	NOUN
fuelectenerg-900	341	10	frequency	frequency	NOUN
fuelectenerg-900	341	11	of	of	ADP
fuelectenerg-900	341	12	1.029	1.029	NUM
fuelectenerg-900	341	13	ghz	ghz	NOUN
fuelectenerg-900	341	14	,	,	PUNCT
fuelectenerg-900	341	15	are	be	AUX
fuelectenerg-900	341	16	1.1	1.1	NUM
fuelectenerg-900	341	17	μm	μm	NOUN
fuelectenerg-900	341	18			NOUN
fuelectenerg-900	341	19	120	120	NUM
fuelectenerg-900	341	20	nm	nm	NOUN
fuelectenerg-900	341	21			PROPN
fuelectenerg-900	341	22	75	75	NUM
fuelectenerg-900	341	23	nm	nm	NOUN
fuelectenerg-900	341	24	,	,	PUNCT
fuelectenerg-900	341	25	and	and	CCONJ
fuelectenerg-900	341	26	q~10	q~10	VERB
fuelectenerg-900	341	27	4	4	NUM
fuelectenerg-900	341	28	.	.	PUNCT
fuelectenerg-900	342	1	other	other	ADJ
fuelectenerg-900	342	2	materials	material	NOUN
fuelectenerg-900	342	3	typical	typical	ADJ
fuelectenerg-900	342	4	for	for	ADP
fuelectenerg-900	342	5	mems	mem	NOUN
fuelectenerg-900	342	6	,	,	PUNCT
fuelectenerg-900	342	7	such	such	ADJ
fuelectenerg-900	342	8	as	as	ADP
fuelectenerg-900	342	9	gallium	gallium	NOUN
fuelectenerg-900	342	10	arsenide	arsenide	NOUN
fuelectenerg-900	342	11	,	,	PUNCT
fuelectenerg-900	342	12	silicon	silicon	NOUN
fuelectenerg-900	342	13	nitride	nitride	NOUN
fuelectenerg-900	342	14	,	,	PUNCT
fuelectenerg-900	342	15	aluminum	aluminum	NOUN
fuelectenerg-900	342	16	nitride	nitride	NOUN
fuelectenerg-900	342	17	and	and	CCONJ
fuelectenerg-900	342	18	nanocrystalline	nanocrystalline	ADJ
fuelectenerg-900	342	19	diamond	diamond	NOUN
fuelectenerg-900	342	20	,	,	PUNCT
fuelectenerg-900	342	21	are	be	AUX
fuelectenerg-900	342	22	also	also	ADV
fuelectenerg-900	342	23	used	use	VERB
fuelectenerg-900	342	24	for	for	ADP
fuelectenerg-900	342	25	fabrication	fabrication	NOUN
fuelectenerg-900	342	26	of	of	ADP
fuelectenerg-900	342	27	nems	nem	NOUN
fuelectenerg-900	342	28	beam	beam	VERB
fuelectenerg-900	342	29	resonators	resonator	NOUN
fuelectenerg-900	342	30	with	with	ADP
fuelectenerg-900	342	31	similar	similar	ADJ
fuelectenerg-900	342	32	values	value	NOUN
fuelectenerg-900	342	33	of	of	ADP
fuelectenerg-900	342	34	q	q	NOUN
fuelectenerg-900	342	35	as	as	SCONJ
fuelectenerg-900	342	36	previously	previously	ADV
fuelectenerg-900	342	37	mentioned	mention	VERB
fuelectenerg-900	342	38	,	,	PUNCT
fuelectenerg-900	342	39	and	and	CCONJ
fuelectenerg-900	342	40	f0	f0	PROPN
fuelectenerg-900	342	41	being	be	AUX
fuelectenerg-900	342	42	in	in	ADP
fuelectenerg-900	342	43	the	the	DET
fuelectenerg-900	342	44	range	range	NOUN
fuelectenerg-900	342	45	from	from	ADP
fuelectenerg-900	342	46	the	the	DET
fuelectenerg-900	342	47	order	order	NOUN
fuelectenerg-900	342	48	of	of	ADP
fuelectenerg-900	342	49	10	10	NUM
fuelectenerg-900	342	50	mhz	mhz	NOUN
fuelectenerg-900	342	51	to	to	ADP
fuelectenerg-900	342	52	the	the	DET
fuelectenerg-900	342	53	order	order	NOUN
fuelectenerg-900	342	54	of	of	ADP
fuelectenerg-900	342	55	100	100	NUM
fuelectenerg-900	342	56	mhz	mhz	NOUN
fuelectenerg-900	342	57	[	[	X
fuelectenerg-900	342	58	75	75	NUM
fuelectenerg-900	342	59	,	,	PUNCT
fuelectenerg-900	342	60	76	76	NUM
fuelectenerg-900	342	61	]	]	PUNCT
fuelectenerg-900	342	62	.	.	PUNCT
fuelectenerg-900	343	1	for	for	ADP
fuelectenerg-900	343	2	example	example	NOUN
fuelectenerg-900	343	3	,	,	PUNCT
fuelectenerg-900	343	4	a	a	DET
fuelectenerg-900	343	5	doubly	doubly	ADV
fuelectenerg-900	343	6	clamped	clamp	VERB
fuelectenerg-900	343	7	nanobeam	nanobeam	ADJ
fuelectenerg-900	343	8	aln	aln	PROPN
fuelectenerg-900	343	9	resonator	resonator	NOUN
fuelectenerg-900	343	10	(	(	PUNCT
fuelectenerg-900	343	11	4	4	NUM
fuelectenerg-900	343	12	μm	μm	NOUN
fuelectenerg-900	343	13			NOUN
fuelectenerg-900	343	14	900	900	NUM
fuelectenerg-900	343	15	nm	nm	NOUN
fuelectenerg-900	343	16			PROPN
fuelectenerg-900	343	17	320	320	NUM
fuelectenerg-900	343	18	nm	nm	NOUN
fuelectenerg-900	343	19	)	)	PUNCT
fuelectenerg-900	343	20	oscillating	oscillate	VERB
fuelectenerg-900	343	21	in	in	ADP
fuelectenerg-900	343	22	flexural	flexural	ADJ
fuelectenerg-900	343	23	mode	mode	NOUN
fuelectenerg-900	343	24	has	have	VERB
fuelectenerg-900	343	25	the	the	DET
fuelectenerg-900	343	26	resonance	resonance	NOUN
fuelectenerg-900	343	27	frequency	frequency	NOUN
fuelectenerg-900	343	28	of	of	ADP
fuelectenerg-900	343	29	78.2	78.2	NUM
fuelectenerg-900	343	30	mhz	mhz	NOUN
fuelectenerg-900	343	31	,	,	PUNCT
fuelectenerg-900	343	32	and	and	CCONJ
fuelectenerg-900	343	33	q=670	q=670	X
fuelectenerg-900	343	34	at	at	ADP
fuelectenerg-900	343	35	room	room	NOUN
fuelectenerg-900	343	36	temperature	temperature	NOUN
fuelectenerg-900	343	37	[	[	X
fuelectenerg-900	343	38	77	77	NUM
fuelectenerg-900	343	39	]	]	PUNCT
fuelectenerg-900	343	40	.	.	PUNCT
fuelectenerg-900	344	1	metallic	metallic	PROPN
fuelectenerg-900	344	2	(	(	PUNCT
fuelectenerg-900	344	3	au	au	PROPN
fuelectenerg-900	344	4	,	,	PUNCT
fuelectenerg-900	344	5	pt	pt	PROPN
fuelectenerg-900	344	6	,	,	PUNCT
fuelectenerg-900	344	7	al	al	PROPN
fuelectenerg-900	344	8	,	,	PUNCT
fuelectenerg-900	344	9	ti	ti	NOUN
fuelectenerg-900	344	10	)	)	PUNCT
fuelectenerg-900	344	11	nems	nem	NOUN
fuelectenerg-900	344	12	resonators	resonator	NOUN
fuelectenerg-900	344	13	were	be	AUX
fuelectenerg-900	344	14	also	also	ADV
fuelectenerg-900	344	15	demonstrated	demonstrate	VERB
fuelectenerg-900	344	16	,	,	PUNCT
fuelectenerg-900	344	17	having	have	VERB
fuelectenerg-900	344	18	fundamental	fundamental	ADJ
fuelectenerg-900	344	19	resonance	resonance	NOUN
fuelectenerg-900	344	20	frequencies	frequency	NOUN
fuelectenerg-900	344	21	of	of	ADP
fuelectenerg-900	344	22	the	the	DET
fuelectenerg-900	344	23	order	order	NOUN
fuelectenerg-900	344	24	of	of	ADP
fuelectenerg-900	344	25	10	10	NUM
fuelectenerg-900	344	26	–	–	SYM
fuelectenerg-900	344	27	100	100	NUM
fuelectenerg-900	344	28	mhz	mhz	NOUN
fuelectenerg-900	344	29	,	,	PUNCT
fuelectenerg-900	344	30	and	and	CCONJ
fuelectenerg-900	344	31	q	q	NOUN
fuelectenerg-900	344	32	of	of	ADP
fuelectenerg-900	344	33	the	the	DET
fuelectenerg-900	344	34	order	order	NOUN
fuelectenerg-900	344	35	of	of	ADP
fuelectenerg-900	344	36	1000	1000	NUM
fuelectenerg-900	344	37	at	at	ADP
fuelectenerg-900	344	38	the	the	DET
fuelectenerg-900	344	39	temperature	temperature	NOUN
fuelectenerg-900	344	40	of	of	ADP
fuelectenerg-900	344	41	4	4	NUM
fuelectenerg-900	344	42	k	k	NOUN
fuelectenerg-900	345	1	[	[	X
fuelectenerg-900	345	2	78	78	NUM
fuelectenerg-900	345	3	,	,	PUNCT
fuelectenerg-900	345	4	79	79	NUM
fuelectenerg-900	345	5	]	]	PUNCT
fuelectenerg-900	345	6	.	.	PUNCT
fuelectenerg-900	346	1	nanostructures	nanostructure	NOUN
fuelectenerg-900	346	2	of	of	ADP
fuelectenerg-900	346	3	a	a	DET
fuelectenerg-900	346	4	high	high	ADJ
fuelectenerg-900	346	5	aspect	aspect	NOUN
fuelectenerg-900	346	6	ratio	ratio	NOUN
fuelectenerg-900	346	7	(	(	PUNCT
fuelectenerg-900	346	8	defined	define	VERB
fuelectenerg-900	346	9	as	as	ADP
fuelectenerg-900	346	10	the	the	DET
fuelectenerg-900	346	11	ratio	ratio	NOUN
fuelectenerg-900	346	12	l	l	PROPN
fuelectenerg-900	346	13	/	/	SYM
fuelectenerg-900	346	14	h	h	NOUN
fuelectenerg-900	346	15	or	or	CCONJ
fuelectenerg-900	346	16	l	l	NOUN
fuelectenerg-900	346	17	/	/	SYM
fuelectenerg-900	346	18	d	d	NOUN
fuelectenerg-900	346	19	,	,	PUNCT
fuelectenerg-900	346	20	where	where	SCONJ
fuelectenerg-900	346	21	d	d	NOUN
fuelectenerg-900	346	22	is	be	AUX
fuelectenerg-900	346	23	a	a	DET
fuelectenerg-900	346	24	structure	structure	NOUN
fuelectenerg-900	346	25	diameter	diameter	NOUN
fuelectenerg-900	346	26	)	)	PUNCT
fuelectenerg-900	346	27	are	be	AUX
fuelectenerg-900	346	28	called	call	VERB
fuelectenerg-900	346	29	nanowires	nanowire	NOUN
fuelectenerg-900	346	30	.	.	PUNCT
fuelectenerg-900	347	1	they	they	PRON
fuelectenerg-900	347	2	can	can	AUX
fuelectenerg-900	347	3	be	be	AUX
fuelectenerg-900	347	4	made	make	VERB
fuelectenerg-900	347	5	of	of	ADP
fuelectenerg-900	347	6	si	si	NOUN
fuelectenerg-900	347	7	,	,	PUNCT
fuelectenerg-900	347	8	sic	sic	ADJ
fuelectenerg-900	347	9	,	,	PUNCT
fuelectenerg-900	347	10	au	au	PROPN
fuelectenerg-900	347	11	,	,	PUNCT
fuelectenerg-900	347	12	ag	ag	PROPN
fuelectenerg-900	347	13	,	,	PUNCT
fuelectenerg-900	347	14	pt	pt	PROPN
fuelectenerg-900	347	15	,	,	PUNCT
fuelectenerg-900	347	16	ge	ge	PROPN
fuelectenerg-900	347	17	,	,	PUNCT
fuelectenerg-900	347	18	zno	zno	PROPN
fuelectenerg-900	347	19	,	,	PUNCT
fuelectenerg-900	347	20	gaas	gaas	NOUN
fuelectenerg-900	347	21	,	,	PUNCT
fuelectenerg-900	347	22	sin	sin	NOUN
fuelectenerg-900	347	23	etc	etc	X
fuelectenerg-900	347	24	.	.	PUNCT
fuelectenerg-900	348	1	[	[	X
fuelectenerg-900	348	2	78	78	NUM
fuelectenerg-900	348	3	-	-	SYM
fuelectenerg-900	348	4	83	83	NUM
fuelectenerg-900	348	5	]	]	PUNCT
fuelectenerg-900	348	6	.	.	PUNCT
fuelectenerg-900	349	1	some	some	PRON
fuelectenerg-900	349	2	of	of	ADP
fuelectenerg-900	349	3	techniques	technique	NOUN
fuelectenerg-900	349	4	for	for	ADP
fuelectenerg-900	349	5	fabrication	fabrication	NOUN
fuelectenerg-900	349	6	of	of	ADP
fuelectenerg-900	349	7	nems	nem	NOUN
fuelectenerg-900	349	8	resonators	resonator	NOUN
fuelectenerg-900	349	9	are	be	AUX
fuelectenerg-900	349	10	inherited	inherit	VERB
fuelectenerg-900	349	11	from	from	ADP
fuelectenerg-900	349	12	mems	mem	NOUN
fuelectenerg-900	349	13	.	.	PUNCT
fuelectenerg-900	350	1	however	however	ADV
fuelectenerg-900	350	2	,	,	PUNCT
fuelectenerg-900	350	3	the	the	DET
fuelectenerg-900	350	4	transition	transition	NOUN
fuelectenerg-900	350	5	from	from	ADP
fuelectenerg-900	350	6	microto	microto	NOUN
fuelectenerg-900	350	7	nanoscale	nanoscale	NOUN
fuelectenerg-900	350	8	often	often	ADV
fuelectenerg-900	350	9	implies	imply	VERB
fuelectenerg-900	350	10	qualitatively	qualitatively	ADV
fuelectenerg-900	350	11	new	new	ADJ
fuelectenerg-900	350	12	technological	technological	ADJ
fuelectenerg-900	350	13	solutions	solution	NOUN
fuelectenerg-900	350	14	.	.	PUNCT
fuelectenerg-900	351	1	different	different	ADJ
fuelectenerg-900	351	2	methods	method	NOUN
fuelectenerg-900	351	3	exist	exist	VERB
fuelectenerg-900	351	4	for	for	ADP
fuelectenerg-900	351	5	fabrication	fabrication	NOUN
fuelectenerg-900	351	6	of	of	ADP
fuelectenerg-900	351	7	nems	nem	NOUN
fuelectenerg-900	351	8	/	/	SYM
fuelectenerg-900	351	9	nanowire	nanowire	ADJ
fuelectenerg-900	351	10	resonators	resonator	NOUN
fuelectenerg-900	351	11	,	,	PUNCT
fuelectenerg-900	351	12	and	and	CCONJ
fuelectenerg-900	351	13	can	can	AUX
fuelectenerg-900	351	14	be	be	AUX
fuelectenerg-900	351	15	divided	divide	VERB
fuelectenerg-900	351	16	into	into	ADP
fuelectenerg-900	351	17	the	the	DET
fuelectenerg-900	351	18	following	follow	VERB
fuelectenerg-900	351	19	categories	category	NOUN
fuelectenerg-900	351	20	:	:	PUNCT
fuelectenerg-900	351	21	top	top	ADJ
fuelectenerg-900	351	22	-	-	PUNCT
fuelectenerg-900	351	23	down	down	NOUN
fuelectenerg-900	351	24	,	,	PUNCT
fuelectenerg-900	351	25	bottom	bottom	NOUN
fuelectenerg-900	351	26	-	-	PUNCT
fuelectenerg-900	351	27	up	up	NOUN
fuelectenerg-900	351	28	and	and	CCONJ
fuelectenerg-900	351	29	hybrid	hybrid	ADJ
fuelectenerg-900	351	30	methods	method	NOUN
fuelectenerg-900	351	31	.	.	PUNCT
fuelectenerg-900	352	1	in	in	ADP
fuelectenerg-900	352	2	top	top	ADJ
fuelectenerg-900	352	3	-	-	PUNCT
fuelectenerg-900	352	4	down	down	ADP
fuelectenerg-900	352	5	methods	method	NOUN
fuelectenerg-900	352	6	nems	nem	NOUN
fuelectenerg-900	352	7	devices	device	NOUN
fuelectenerg-900	352	8	are	be	AUX
fuelectenerg-900	352	9	made	make	VERB
fuelectenerg-900	352	10	of	of	ADP
fuelectenerg-900	352	11	bulk	bulk	ADJ
fuelectenerg-900	352	12	materials	material	NOUN
fuelectenerg-900	352	13	or	or	CCONJ
fuelectenerg-900	352	14	thin	thin	ADJ
fuelectenerg-900	352	15	films	film	NOUN
fuelectenerg-900	352	16	that	that	PRON
fuelectenerg-900	352	17	are	be	AUX
fuelectenerg-900	352	18	patterned	pattern	VERB
fuelectenerg-900	352	19	by	by	ADP
fuelectenerg-900	352	20	lithography	lithography	NOUN
fuelectenerg-900	352	21	and	and	CCONJ
fuelectenerg-900	352	22	etching	etch	VERB
fuelectenerg-900	352	23	to	to	PART
fuelectenerg-900	352	24	create	create	VERB
fuelectenerg-900	352	25	fully	fully	ADV
fuelectenerg-900	352	26	released	release	VERB
fuelectenerg-900	352	27	structures	structure	NOUN
fuelectenerg-900	352	28	such	such	ADJ
fuelectenerg-900	352	29	as	as	ADP
fuelectenerg-900	352	30	clamped	clamp	VERB
fuelectenerg-900	352	31	beams	beam	NOUN
fuelectenerg-900	352	32	and	and	CCONJ
fuelectenerg-900	352	33	cantilevers	cantilever	NOUN
fuelectenerg-900	352	34	.	.	PUNCT
fuelectenerg-900	353	1	top	top	ADJ
fuelectenerg-900	353	2	-	-	PUNCT
fuelectenerg-900	353	3	down	down	ADP
fuelectenerg-900	353	4	methods	method	NOUN
fuelectenerg-900	353	5	are	be	AUX
fuelectenerg-900	353	6	e.g.	e.g.	ADV
fuelectenerg-900	353	7	those	those	PRON
fuelectenerg-900	353	8	based	base	VERB
fuelectenerg-900	353	9	on	on	ADP
fuelectenerg-900	353	10	standard	standard	ADJ
fuelectenerg-900	353	11	electron	electron	NOUN
fuelectenerg-900	353	12	beam	beam	NOUN
fuelectenerg-900	353	13	lithography	lithography	NOUN
fuelectenerg-900	353	14	(	(	PUNCT
fuelectenerg-900	353	15	ebl	ebl	PROPN
fuelectenerg-900	353	16	)	)	PUNCT
fuelectenerg-900	353	17	,	,	PUNCT
fuelectenerg-900	353	18	superlattice	superlattice	NOUN
fuelectenerg-900	353	19	nanowire	nanowire	NOUN
fuelectenerg-900	353	20	pattern	pattern	NOUN
fuelectenerg-900	353	21	-	-	PUNCT
fuelectenerg-900	353	22	transfer	transfer	NOUN
fuelectenerg-900	353	23	(	(	PUNCT
fuelectenerg-900	353	24	snap	snap	NOUN
fuelectenerg-900	353	25	)	)	PUNCT
fuelectenerg-900	353	26	,	,	PUNCT
fuelectenerg-900	353	27	nanoimprint	nanoimprint	ADJ
fuelectenerg-900	353	28	lithography	lithography	NOUN
fuelectenerg-900	353	29	(	(	PUNCT
fuelectenerg-900	353	30	nil	nil	NOUN
fuelectenerg-900	353	31	)	)	PUNCT
fuelectenerg-900	353	32	or	or	CCONJ
fuelectenerg-900	353	33	stencil	stencil	PROPN
fuelectenerg-900	353	34	lithography	lithography	NOUN
fuelectenerg-900	353	35	.	.	PUNCT
fuelectenerg-900	354	1	top	top	ADJ
fuelectenerg-900	354	2	-	-	PUNCT
fuelectenerg-900	354	3	down	down	ADP
fuelectenerg-900	354	4	methods	method	NOUN
fuelectenerg-900	354	5	typically	typically	ADV
fuelectenerg-900	354	6	provide	provide	VERB
fuelectenerg-900	354	7	a	a	DET
fuelectenerg-900	354	8	high	high	ADJ
fuelectenerg-900	354	9	level	level	NOUN
fuelectenerg-900	354	10	of	of	ADP
fuelectenerg-900	354	11	control	control	NOUN
fuelectenerg-900	354	12	regarding	regard	VERB
fuelectenerg-900	354	13	the	the	DET
fuelectenerg-900	354	14	design	design	NOUN
fuelectenerg-900	354	15	and	and	CCONJ
fuelectenerg-900	354	16	geometry	geometry	NOUN
fuelectenerg-900	354	17	of	of	ADP
fuelectenerg-900	354	18	the	the	DET
fuelectenerg-900	354	19	resonator	resonator	NOUN
fuelectenerg-900	354	20	.	.	PUNCT
fuelectenerg-900	355	1	by	by	ADP
fuelectenerg-900	355	2	using	use	VERB
fuelectenerg-900	355	3	ebl	ebl	PROPN
fuelectenerg-900	355	4	very	very	ADV
fuelectenerg-900	355	5	high	high	ADJ
fuelectenerg-900	355	6	aspect	aspect	NOUN
fuelectenerg-900	355	7	ratios	ratio	NOUN
fuelectenerg-900	355	8	of	of	ADP
fuelectenerg-900	355	9	nems	nem	NOUN
fuelectenerg-900	355	10	structures	structure	NOUN
fuelectenerg-900	355	11	are	be	AUX
fuelectenerg-900	355	12	achieved	achieve	VERB
fuelectenerg-900	355	13	,	,	PUNCT
fuelectenerg-900	355	14	such	such	ADJ
fuelectenerg-900	355	15	as	as	ADP
fuelectenerg-900	355	16	l	l	NOUN
fuelectenerg-900	355	17	/	/	SYM
fuelectenerg-900	355	18	h250	h250	NOUN
fuelectenerg-900	355	19	in	in	ADP
fuelectenerg-900	355	20	20	20	NUM
fuelectenerg-900	355	21	-	-	SYM
fuelectenerg-900	355	22	25	25	NUM
fuelectenerg-900	355	23	nm	nm	ADV
fuelectenerg-900	355	24	thick	thick	ADJ
fuelectenerg-900	355	25	sic	sic	ADJ
fuelectenerg-900	355	26	nanowires	nanowire	NOUN
fuelectenerg-900	355	27	presented	present	VERB
fuelectenerg-900	355	28	in	in	ADP
fuelectenerg-900	355	29	[	[	X
fuelectenerg-900	355	30	81	81	NUM
fuelectenerg-900	355	31	]	]	PUNCT
fuelectenerg-900	355	32	.	.	PUNCT
fuelectenerg-900	356	1	this	this	DET
fuelectenerg-900	356	2	method	method	NOUN
fuelectenerg-900	356	3	enables	enable	VERB
fuelectenerg-900	356	4	fabrication	fabrication	NOUN
fuelectenerg-900	356	5	of	of	ADP
fuelectenerg-900	356	6	nanowires	nanowire	NOUN
fuelectenerg-900	356	7	using	use	VERB
fuelectenerg-900	356	8	different	different	ADJ
fuelectenerg-900	356	9	materials	material	NOUN
fuelectenerg-900	356	10	such	such	ADJ
fuelectenerg-900	356	11	as	as	ADP
fuelectenerg-900	356	12	si	si	PROPN
fuelectenerg-900	356	13	,	,	PUNCT
fuelectenerg-900	356	14	gaas	gaas	NOUN
fuelectenerg-900	356	15	,	,	PUNCT
fuelectenerg-900	356	16	sin	sin	NOUN
fuelectenerg-900	356	17	etc	etc	X
fuelectenerg-900	356	18	.	.	X
fuelectenerg-900	356	19	nanowires	nanowire	NOUN
fuelectenerg-900	356	20	made	make	VERB
fuelectenerg-900	356	21	of	of	ADP
fuelectenerg-900	356	22	au	au	PROPN
fuelectenerg-900	356	23	,	,	PUNCT
fuelectenerg-900	356	24	cr	cr	PROPN
fuelectenerg-900	356	25	,	,	PUNCT
fuelectenerg-900	356	26	al	al	PROPN
fuelectenerg-900	356	27	,	,	PUNCT
fuelectenerg-900	356	28	ti	ti	PROPN
fuelectenerg-900	356	29	,	,	PUNCT
fuelectenerg-900	356	30	nb	nb	PROPN
fuelectenerg-900	356	31	,	,	PUNCT
fuelectenerg-900	356	32	pt	pt	PROPN
fuelectenerg-900	356	33	or	or	CCONJ
fuelectenerg-900	356	34	ni	ni	PROPN
fuelectenerg-900	356	35	by	by	ADP
fuelectenerg-900	356	36	using	use	VERB
fuelectenerg-900	356	37	snap	snap	NOUN
fuelectenerg-900	356	38	method	method	NOUN
fuelectenerg-900	356	39	are	be	AUX
fuelectenerg-900	356	40	reported	report	VERB
fuelectenerg-900	356	41	.	.	PUNCT
fuelectenerg-900	357	1	one	one	NUM
fuelectenerg-900	357	2	of	of	ADP
fuelectenerg-900	357	3	them	they	PRON
fuelectenerg-900	357	4	is	be	AUX
fuelectenerg-900	357	5	a	a	DET
fuelectenerg-900	357	6	suspended	suspend	VERB
fuelectenerg-900	357	7	pt	pt	NOUN
fuelectenerg-900	357	8	nanowire	nanowire	NOUN
fuelectenerg-900	357	9	with	with	ADP
fuelectenerg-900	357	10	a	a	DET
fuelectenerg-900	357	11	diameter	diameter	NOUN
fuelectenerg-900	357	12	of	of	ADP
fuelectenerg-900	357	13	20	20	NUM
fuelectenerg-900	357	14	nm	nm	NOUN
fuelectenerg-900	357	15	and	and	CCONJ
fuelectenerg-900	357	16	a	a	DET
fuelectenerg-900	357	17	length	length	NOUN
fuelectenerg-900	357	18	of	of	ADP
fuelectenerg-900	357	19	0.75	0.75	NUM
fuelectenerg-900	357	20	m	m	PROPN
fuelectenerg-900	357	21	(	(	PUNCT
fuelectenerg-900	357	22	a	a	DET
fuelectenerg-900	357	23	diameter	diameter	NOUN
fuelectenerg-900	357	24	as	as	ADV
fuelectenerg-900	357	25	small	small	ADJ
fuelectenerg-900	357	26	as	as	ADP
fuelectenerg-900	357	27	8	8	NUM
fuelectenerg-900	357	28	nm	nm	NOUN
fuelectenerg-900	357	29	is	be	AUX
fuelectenerg-900	357	30	possible	possible	ADJ
fuelectenerg-900	357	31	)	)	PUNCT
fuelectenerg-900	358	1	[	[	X
fuelectenerg-900	358	2	80	80	NUM
fuelectenerg-900	358	3	]	]	PUNCT
fuelectenerg-900	358	4	.	.	PUNCT
fuelectenerg-900	359	1	nil	nil	NOUN
fuelectenerg-900	359	2	offers	offer	VERB
fuelectenerg-900	359	3	high	high	ADJ
fuelectenerg-900	359	4	resolution	resolution	NOUN
fuelectenerg-900	359	5	(	(	PUNCT
fuelectenerg-900	359	6	5	5	NUM
fuelectenerg-900	359	7	nm	nm	NOUN
fuelectenerg-900	359	8	)	)	PUNCT
fuelectenerg-900	359	9	and	and	CCONJ
fuelectenerg-900	359	10	also	also	ADV
fuelectenerg-900	359	11	high	high	ADJ
fuelectenerg-900	359	12	-	-	PUNCT
fuelectenerg-900	359	13	volume	volume	NOUN
fuelectenerg-900	359	14	fabrication	fabrication	NOUN
fuelectenerg-900	359	15	.	.	PUNCT
fuelectenerg-900	360	1	metallic	metallic	ADJ
fuelectenerg-900	360	2	nanowires	nanowire	NOUN
fuelectenerg-900	360	3	can	can	AUX
fuelectenerg-900	360	4	be	be	AUX
fuelectenerg-900	360	5	fabricated	fabricate	VERB
fuelectenerg-900	360	6	by	by	ADP
fuelectenerg-900	360	7	using	use	VERB
fuelectenerg-900	360	8	wafer	wafer	NOUN
fuelectenerg-900	360	9	-	-	PUNCT
fuelectenerg-900	360	10	scale	scale	NOUN
fuelectenerg-900	360	11	stencil	stencil	NOUN
fuelectenerg-900	360	12	lithography	lithography	NOUN
fuelectenerg-900	360	13	.	.	PUNCT
fuelectenerg-900	361	1	in	in	ADP
fuelectenerg-900	361	2	[	[	X
fuelectenerg-900	361	3	82	82	NUM
fuelectenerg-900	361	4	]	]	SYM
fuelectenerg-900	361	5	70	70	NUM
fuelectenerg-900	361	6	nm	nm	ADV
fuelectenerg-900	361	7	thin	thin	ADJ
fuelectenerg-900	361	8	al	al	PROPN
fuelectenerg-900	361	9	nanowires	nanowire	NOUN
fuelectenerg-900	361	10	,	,	PUNCT
fuelectenerg-900	361	11	5	5	NUM
fuelectenerg-900	361	12	m	m	NOUN
fuelectenerg-900	361	13	long	long	ADV
fuelectenerg-900	361	14	,	,	PUNCT
fuelectenerg-900	361	15	fabricated	fabricate	VERB
fuelectenerg-900	361	16	by	by	ADP
fuelectenerg-900	361	17	using	use	VERB
fuelectenerg-900	361	18	this	this	DET
fuelectenerg-900	361	19	method	method	NOUN
fuelectenerg-900	361	20	are	be	AUX
fuelectenerg-900	361	21	presented	present	VERB
fuelectenerg-900	361	22	.	.	PUNCT
fuelectenerg-900	362	1	bottom	bottom	ADJ
fuelectenerg-900	362	2	-	-	PUNCT
fuelectenerg-900	362	3	up	up	ADP
fuelectenerg-900	362	4	methods	method	NOUN
fuelectenerg-900	362	5	include	include	VERB
fuelectenerg-900	362	6	,	,	PUNCT
fuelectenerg-900	362	7	for	for	ADP
fuelectenerg-900	362	8	example	example	NOUN
fuelectenerg-900	362	9	,	,	PUNCT
fuelectenerg-900	362	10	synthesis	synthesis	NOUN
fuelectenerg-900	362	11	of	of	ADP
fuelectenerg-900	362	12	si	si	X
fuelectenerg-900	362	13	,	,	PUNCT
fuelectenerg-900	362	14	sic	sic	ADJ
fuelectenerg-900	362	15	,	,	PUNCT
fuelectenerg-900	362	16	gan	gan	PROPN
fuelectenerg-900	362	17	,	,	PUNCT
fuelectenerg-900	362	18	zno	zno	NOUN
fuelectenerg-900	362	19	nanowires	nanowire	NOUN
fuelectenerg-900	362	20	by	by	ADP
fuelectenerg-900	362	21	vapor	vapor	NOUN
fuelectenerg-900	362	22	-	-	PUNCT
fuelectenerg-900	362	23	liquid	liquid	NOUN
fuelectenerg-900	362	24	-	-	PUNCT
fuelectenerg-900	362	25	solid	solid	ADJ
fuelectenerg-900	362	26	(	(	PUNCT
fuelectenerg-900	362	27	vls	vls	NOUN
fuelectenerg-900	362	28	)	)	PUNCT
fuelectenerg-900	362	29	growth	growth	NOUN
fuelectenerg-900	362	30	.	.	PUNCT
fuelectenerg-900	363	1	problem	problem	NOUN
fuelectenerg-900	363	2	of	of	ADP
fuelectenerg-900	363	3	bottom	bottom	ADJ
fuelectenerg-900	363	4	-	-	PUNCT
fuelectenerg-900	363	5	up	up	ADP
fuelectenerg-900	363	6	methods	method	NOUN
fuelectenerg-900	363	7	in	in	ADP
fuelectenerg-900	363	8	general	general	ADJ
fuelectenerg-900	363	9	is	be	AUX
fuelectenerg-900	363	10	the	the	DET
fuelectenerg-900	363	11	control	control	NOUN
fuelectenerg-900	363	12	of	of	ADP
fuelectenerg-900	363	13	nanowire	nanowire	ADJ
fuelectenerg-900	363	14	length	length	NOUN
fuelectenerg-900	363	15	,	,	PUNCT
fuelectenerg-900	363	16	diameter	diameter	NOUN
fuelectenerg-900	363	17	and	and	CCONJ
fuelectenerg-900	363	18	spatial	spatial	ADJ
fuelectenerg-900	363	19	distribution	distribution	NOUN
fuelectenerg-900	363	20	.	.	PUNCT
fuelectenerg-900	364	1	another	another	DET
fuelectenerg-900	364	2	disadvantage	disadvantage	NOUN
fuelectenerg-900	364	3	of	of	ADP
fuelectenerg-900	364	4	these	these	DET
fuelectenerg-900	364	5	methods	method	NOUN
fuelectenerg-900	364	6	is	be	AUX
fuelectenerg-900	364	7	their	their	PRON
fuelectenerg-900	364	8	low	low	ADJ
fuelectenerg-900	364	9	efficiency	efficiency	NOUN
fuelectenerg-900	364	10	.	.	PUNCT
fuelectenerg-900	365	1	hybrid	hybrid	ADJ
fuelectenerg-900	365	2	top	top	ADJ
fuelectenerg-900	365	3	-	-	PUNCT
fuelectenerg-900	365	4	down	down	ADP
fuelectenerg-900	365	5	/	/	SYM
fuelectenerg-900	365	6	bottom	bottom	ADJ
fuelectenerg-900	365	7	-	-	PUNCT
fuelectenerg-900	365	8	up	up	ADP
fuelectenerg-900	365	9	methods	method	NOUN
fuelectenerg-900	365	10	include	include	VERB
fuelectenerg-900	365	11	,	,	PUNCT
fuelectenerg-900	365	12	for	for	ADP
fuelectenerg-900	365	13	example	example	NOUN
fuelectenerg-900	365	14	,	,	PUNCT
fuelectenerg-900	365	15	integration	integration	NOUN
fuelectenerg-900	365	16	of	of	ADP
fuelectenerg-900	365	17	si	si	PROPN
fuelectenerg-900	365	18	nanowires	nanowire	NOUN
fuelectenerg-900	365	19	synthesis	synthesis	NOUN
fuelectenerg-900	365	20	into	into	ADP
fuelectenerg-900	365	21	device	device	NOUN
fuelectenerg-900	365	22	fabrication	fabrication	NOUN
fuelectenerg-900	365	23	[	[	X
fuelectenerg-900	365	24	83	83	NUM
fuelectenerg-900	365	25	]	]	PUNCT
fuelectenerg-900	365	26	.	.	PUNCT
fuelectenerg-900	366	1	these	these	DET
fuelectenerg-900	366	2	methods	method	NOUN
fuelectenerg-900	366	3	enable	enable	VERB
fuelectenerg-900	366	4	better	well	ADJ
fuelectenerg-900	366	5	control	control	NOUN
fuelectenerg-900	366	6	of	of	ADP
fuelectenerg-900	366	7	nanowire	nanowire	ADJ
fuelectenerg-900	366	8	dimensions	dimension	NOUN
fuelectenerg-900	366	9	.	.	PUNCT
fuelectenerg-900	367	1	si	si	PROPN
fuelectenerg-900	367	2	nanowires	nanowire	NOUN
fuelectenerg-900	367	3	of	of	ADP
fuelectenerg-900	367	4	a	a	DET
fuelectenerg-900	367	5	50	50	NUM
fuelectenerg-900	367	6	-	-	SYM
fuelectenerg-900	367	7	150	150	NUM
fuelectenerg-900	367	8	nm	nm	NOUN
fuelectenerg-900	367	9	diameter	diameter	NOUN
fuelectenerg-900	367	10	,	,	PUNCT
fuelectenerg-900	367	11	about	about	ADV
fuelectenerg-900	367	12	2	2	NUM
fuelectenerg-900	367	13	m	m	PROPN
fuelectenerg-900	367	14	in	in	ADP
fuelectenerg-900	367	15	length	length	NOUN
fuelectenerg-900	367	16	,	,	PUNCT
fuelectenerg-900	367	17	fabricated	fabricate	VERB
fuelectenerg-900	367	18	by	by	ADP
fuelectenerg-900	367	19	using	use	VERB
fuelectenerg-900	367	20	a	a	DET
fuelectenerg-900	367	21	hybrid	hybrid	ADJ
fuelectenerg-900	367	22	method	method	NOUN
fuelectenerg-900	367	23	,	,	PUNCT
fuelectenerg-900	367	24	are	be	AUX
fuelectenerg-900	367	25	presented	present	VERB
fuelectenerg-900	367	26	in	in	ADP
fuelectenerg-900	367	27	[	[	X
fuelectenerg-900	367	28	71	71	NUM
fuelectenerg-900	367	29	]	]	PUNCT
fuelectenerg-900	367	30	.	.	PUNCT
fuelectenerg-900	368	1	among	among	ADP
fuelectenerg-900	368	2	them	they	PRON
fuelectenerg-900	368	3	are	be	AUX
fuelectenerg-900	368	4	a	a	DET
fuelectenerg-900	368	5	metalized	metalize	VERB
fuelectenerg-900	368	6	si	si	NOUN
fuelectenerg-900	368	7	nanowire	nanowire	NOUN
fuelectenerg-900	368	8	with	with	ADP
fuelectenerg-900	368	9	a	a	DET
fuelectenerg-900	368	10	resonance	resonance	NOUN
fuelectenerg-900	368	11	frequency	frequency	NOUN
fuelectenerg-900	368	12	about	about	ADP
fuelectenerg-900	368	13	200	200	NUM
fuelectenerg-900	368	14	mhz	mhz	NOUN
fuelectenerg-900	368	15	and	and	CCONJ
fuelectenerg-900	368	16	q2500	q2500	PROPN
fuelectenerg-900	368	17	(	(	PUNCT
fuelectenerg-900	368	18	measured	measure	VERB
fuelectenerg-900	368	19	in	in	ADP
fuelectenerg-900	368	20	high	high	ADJ
fuelectenerg-900	368	21	vacuum	vacuum	NOUN
fuelectenerg-900	368	22	at	at	ADP
fuelectenerg-900	368	23	cryogenic	cryogenic	ADJ
fuelectenerg-900	368	24	temperatures	temperature	NOUN
fuelectenerg-900	368	25	)	)	PUNCT
fuelectenerg-900	368	26	,	,	PUNCT
fuelectenerg-900	368	27	whose	whose	DET
fuelectenerg-900	368	28	resistance	resistance	NOUN
fuelectenerg-900	368	29	is	be	AUX
fuelectenerg-900	368	30	matched	match	VERB
fuelectenerg-900	368	31	to	to	ADP
fuelectenerg-900	368	32	50	50	NUM
fuelectenerg-900	368	33			NUM
fuelectenerg-900	368	34	,	,	PUNCT
fuelectenerg-900	368	35	a	a	DET
fuelectenerg-900	368	36	80	80	NUM
fuelectenerg-900	368	37	mhz	mhz	NOUN
fuelectenerg-900	368	38	non	non	ADJ
fuelectenerg-900	368	39	-	-	ADJ
fuelectenerg-900	368	40	metalized	metalized	ADJ
fuelectenerg-900	368	41	si	si	NOUN
fuelectenerg-900	368	42	nanowire	nanowire	NOUN
fuelectenerg-900	368	43	with	with	ADP
fuelectenerg-900	368	44	q=13100	q=13100	PROPN
fuelectenerg-900	368	45	,	,	PUNCT
fuelectenerg-900	368	46	and	and	CCONJ
fuelectenerg-900	368	47	a	a	DET
fuelectenerg-900	368	48	non	non	ADJ
fuelectenerg-900	368	49	-	-	ADJ
fuelectenerg-900	368	50	metalized	metalized	ADJ
fuelectenerg-900	368	51	si	si	NOUN
fuelectenerg-900	368	52	nanowire	nanowire	NOUN
fuelectenerg-900	368	53	with	with	ADP
fuelectenerg-900	368	54	f0=215	f0=215	ADJ
fuelectenerg-900	368	55	mhz	mhz	NOUN
fuelectenerg-900	368	56	and	and	CCONJ
fuelectenerg-900	368	57	q=5750	q=5750	PROPN
fuelectenerg-900	368	58	(	(	PUNCT
fuelectenerg-900	368	59	the	the	DET
fuelectenerg-900	368	60	rf	rf	NOUN
fuelectenerg-900	368	61	mems	mem	NOUN
fuelectenerg-900	368	62	/	/	SYM
fuelectenerg-900	368	63	nems	nem	NOUN
fuelectenerg-900	368	64	resonators	resonator	NOUN
fuelectenerg-900	368	65	for	for	ADP
fuelectenerg-900	368	66	wireless	wireless	ADJ
fuelectenerg-900	368	67	communication	communication	NOUN
fuelectenerg-900	368	68	systems	system	NOUN
fuelectenerg-900	368	69	and	and	CCONJ
fuelectenerg-900	368	70	adsorption	adsorption	NOUN
fuelectenerg-900	368	71	-	-	PUNCT
fuelectenerg-900	368	72	desorption	desorption	NOUN
fuelectenerg-900	368	73	phase	phase	NOUN
fuelectenerg-900	368	74	noise	noise	NOUN
fuelectenerg-900	368	75	363	363	NUM
fuelectenerg-900	368	76	resistance	resistance	NOUN
fuelectenerg-900	368	77	of	of	ADP
fuelectenerg-900	368	78	the	the	DET
fuelectenerg-900	368	79	latter	latter	ADJ
fuelectenerg-900	368	80	two	two	NUM
fuelectenerg-900	368	81	is	be	AUX
fuelectenerg-900	368	82	of	of	ADP
fuelectenerg-900	368	83	order	order	NOUN
fuelectenerg-900	368	84	of	of	ADP
fuelectenerg-900	368	85	10	10	NUM
fuelectenerg-900	368	86	-	-	SYM
fuelectenerg-900	368	87	100	100	NUM
fuelectenerg-900	368	88	k	k	NOUN
fuelectenerg-900	368	89	)	)	PUNCT
fuelectenerg-900	368	90	.	.	PUNCT
fuelectenerg-900	369	1	it	it	PRON
fuelectenerg-900	369	2	can	can	AUX
fuelectenerg-900	369	3	be	be	AUX
fuelectenerg-900	369	4	concluded	conclude	VERB
fuelectenerg-900	369	5	that	that	SCONJ
fuelectenerg-900	369	6	the	the	DET
fuelectenerg-900	369	7	product	product	NOUN
fuelectenerg-900	369	8	f0q	f0q	PROPN
fuelectenerg-900	369	9	of	of	ADP
fuelectenerg-900	369	10	the	the	DET
fuelectenerg-900	369	11	order	order	NOUN
fuelectenerg-900	369	12	of	of	ADP
fuelectenerg-900	369	13	10	10	NUM
fuelectenerg-900	369	14	12	12	NUM
fuelectenerg-900	369	15	is	be	AUX
fuelectenerg-900	369	16	achieved	achieve	VERB
fuelectenerg-900	369	17	in	in	ADP
fuelectenerg-900	369	18	nanowire	nanowire	ADJ
fuelectenerg-900	369	19	resonators	resonator	NOUN
fuelectenerg-900	369	20	.	.	PUNCT
fuelectenerg-900	370	1	there	there	PRON
fuelectenerg-900	370	2	are	be	VERB
fuelectenerg-900	370	3	several	several	ADJ
fuelectenerg-900	370	4	methods	method	NOUN
fuelectenerg-900	370	5	of	of	ADP
fuelectenerg-900	370	6	actuation	actuation	NOUN
fuelectenerg-900	370	7	and	and	CCONJ
fuelectenerg-900	370	8	detection	detection	NOUN
fuelectenerg-900	370	9	of	of	ADP
fuelectenerg-900	370	10	motion	motion	NOUN
fuelectenerg-900	370	11	in	in	ADP
fuelectenerg-900	370	12	nems	nem	NOUN
fuelectenerg-900	370	13	resonators	resonator	NOUN
fuelectenerg-900	370	14	:	:	PUNCT
fuelectenerg-900	370	15	electrostatic	electrostatic	ADJ
fuelectenerg-900	370	16	,	,	PUNCT
fuelectenerg-900	370	17	optical	optical	ADJ
fuelectenerg-900	370	18	(	(	PUNCT
fuelectenerg-900	370	19	e.g.	e.g.	ADV
fuelectenerg-900	370	20	free	free	ADJ
fuelectenerg-900	370	21	-	-	PUNCT
fuelectenerg-900	370	22	space	space	NOUN
fuelectenerg-900	370	23	or	or	CCONJ
fuelectenerg-900	370	24	fiber	fiber	NOUN
fuelectenerg-900	370	25	-	-	PUNCT
fuelectenerg-900	370	26	optical	optical	ADJ
fuelectenerg-900	370	27	interferometry	interferometry	NOUN
fuelectenerg-900	370	28	)	)	PUNCT
fuelectenerg-900	370	29	,	,	PUNCT
fuelectenerg-900	370	30	piezoelectric	piezoelectric	NOUN
fuelectenerg-900	370	31	,	,	PUNCT
fuelectenerg-900	370	32	magnetomotive	magnetomotive	ADJ
fuelectenerg-900	370	33	/	/	SYM
fuelectenerg-900	370	34	electromotive	electromotive	ADJ
fuelectenerg-900	370	35	,	,	PUNCT
fuelectenerg-900	370	36	piezoresistive	piezoresistive	ADJ
fuelectenerg-900	370	37	,	,	PUNCT
fuelectenerg-900	370	38	methods	method	NOUN
fuelectenerg-900	370	39	based	base	VERB
fuelectenerg-900	370	40	on	on	ADP
fuelectenerg-900	370	41	single	single	ADJ
fuelectenerg-900	370	42	electron	electron	NOUN
fuelectenerg-900	370	43	transistors	transistor	NOUN
fuelectenerg-900	370	44	(	(	PUNCT
fuelectenerg-900	370	45	set	set	PROPN
fuelectenerg-900	370	46	)	)	PUNCT
fuelectenerg-900	370	47	,	,	PUNCT
fuelectenerg-900	370	48	atomic	atomic	ADJ
fuelectenerg-900	370	49	point	point	NOUN
fuelectenerg-900	370	50	contact	contact	NOUN
fuelectenerg-900	370	51	(	(	PUNCT
fuelectenerg-900	370	52	limited	limit	VERB
fuelectenerg-900	370	53	to	to	ADP
fuelectenerg-900	370	54	resonators	resonator	NOUN
fuelectenerg-900	370	55	made	make	VERB
fuelectenerg-900	370	56	of	of	ADP
fuelectenerg-900	370	57	conductive	conductive	ADJ
fuelectenerg-900	370	58	materials	material	NOUN
fuelectenerg-900	370	59	that	that	PRON
fuelectenerg-900	370	60	do	do	AUX
fuelectenerg-900	370	61	not	not	PART
fuelectenerg-900	370	62	form	form	VERB
fuelectenerg-900	370	63	surface	surface	NOUN
fuelectenerg-900	370	64	oxides	oxide	NOUN
fuelectenerg-900	370	65	)	)	PUNCT
fuelectenerg-900	370	66	,	,	PUNCT
fuelectenerg-900	370	67	photonic	photonic	ADJ
fuelectenerg-900	370	68	transduction	transduction	NOUN
fuelectenerg-900	370	69	etc	etc	X
fuelectenerg-900	370	70	.	.	X
fuelectenerg-900	371	1	however	however	ADV
fuelectenerg-900	371	2	,	,	PUNCT
fuelectenerg-900	371	3	not	not	PART
fuelectenerg-900	371	4	all	all	DET
fuelectenerg-900	371	5	the	the	DET
fuelectenerg-900	371	6	mentioned	mention	VERB
fuelectenerg-900	371	7	methods	method	NOUN
fuelectenerg-900	371	8	are	be	AUX
fuelectenerg-900	371	9	equally	equally	ADV
fuelectenerg-900	371	10	suitable	suitable	ADJ
fuelectenerg-900	371	11	for	for	ADP
fuelectenerg-900	371	12	applications	application	NOUN
fuelectenerg-900	371	13	requiring	require	VERB
fuelectenerg-900	371	14	a	a	DET
fuelectenerg-900	371	15	compact	compact	ADJ
fuelectenerg-900	371	16	actuation	actuation	NOUN
fuelectenerg-900	371	17	and	and	CCONJ
fuelectenerg-900	371	18	detection	detection	NOUN
fuelectenerg-900	371	19	system	system	NOUN
fuelectenerg-900	371	20	(	(	PUNCT
fuelectenerg-900	371	21	preferably	preferably	ADV
fuelectenerg-900	371	22	on	on	ADP
fuelectenerg-900	371	23	a	a	DET
fuelectenerg-900	371	24	chip	chip	NOUN
fuelectenerg-900	371	25	)	)	PUNCT
fuelectenerg-900	371	26	,	,	PUNCT
fuelectenerg-900	371	27	for	for	ADP
fuelectenerg-900	371	28	resonators	resonator	NOUN
fuelectenerg-900	371	29	of	of	ADP
fuelectenerg-900	371	30	extremely	extremely	ADV
fuelectenerg-900	371	31	small	small	ADJ
fuelectenerg-900	371	32	dimensions	dimension	NOUN
fuelectenerg-900	371	33	or	or	CCONJ
fuelectenerg-900	371	34	those	those	PRON
fuelectenerg-900	371	35	made	make	VERB
fuelectenerg-900	371	36	of	of	ADP
fuelectenerg-900	371	37	arbitrary	arbitrary	ADJ
fuelectenerg-900	371	38	materials	material	NOUN
fuelectenerg-900	371	39	.	.	PUNCT
fuelectenerg-900	372	1	for	for	ADP
fuelectenerg-900	372	2	example	example	NOUN
fuelectenerg-900	372	3	,	,	PUNCT
fuelectenerg-900	372	4	magnetomotive	magnetomotive	ADJ
fuelectenerg-900	372	5	transduction	transduction	NOUN
fuelectenerg-900	372	6	is	be	AUX
fuelectenerg-900	372	7	often	often	ADV
fuelectenerg-900	372	8	the	the	DET
fuelectenerg-900	372	9	right	right	ADJ
fuelectenerg-900	372	10	choice	choice	NOUN
fuelectenerg-900	372	11	for	for	ADP
fuelectenerg-900	372	12	both	both	CCONJ
fuelectenerg-900	372	13	drive	drive	NOUN
fuelectenerg-900	372	14	and	and	CCONJ
fuelectenerg-900	372	15	detection	detection	NOUN
fuelectenerg-900	372	16	of	of	ADP
fuelectenerg-900	372	17	motion	motion	NOUN
fuelectenerg-900	372	18	of	of	ADP
fuelectenerg-900	372	19	very	very	ADV
fuelectenerg-900	372	20	small	small	ADJ
fuelectenerg-900	372	21	structures	structure	NOUN
fuelectenerg-900	372	22	oscillating	oscillate	VERB
fuelectenerg-900	372	23	at	at	ADP
fuelectenerg-900	372	24	extremely	extremely	ADV
fuelectenerg-900	372	25	high	high	ADJ
fuelectenerg-900	372	26	frequencies	frequency	NOUN
fuelectenerg-900	372	27	.	.	PUNCT
fuelectenerg-900	373	1	however	however	ADV
fuelectenerg-900	373	2	,	,	PUNCT
fuelectenerg-900	373	3	its	its	PRON
fuelectenerg-900	373	4	significant	significant	ADJ
fuelectenerg-900	373	5	limitation	limitation	NOUN
fuelectenerg-900	373	6	is	be	AUX
fuelectenerg-900	373	7	that	that	SCONJ
fuelectenerg-900	373	8	it	it	PRON
fuelectenerg-900	373	9	requires	require	VERB
fuelectenerg-900	373	10	a	a	DET
fuelectenerg-900	373	11	strong	strong	ADJ
fuelectenerg-900	373	12	magnetic	magnetic	ADJ
fuelectenerg-900	373	13	field	field	NOUN
fuelectenerg-900	373	14	(	(	PUNCT
fuelectenerg-900	373	15	1–16	1–16	PROPN
fuelectenerg-900	373	16	t	t	PROPN
fuelectenerg-900	373	17	)	)	PUNCT
fuelectenerg-900	373	18	produced	produce	VERB
fuelectenerg-900	373	19	by	by	ADP
fuelectenerg-900	373	20	a	a	DET
fuelectenerg-900	373	21	superconducting	superconducte	VERB
fuelectenerg-900	373	22	magnet	magnet	NOUN
fuelectenerg-900	373	23	.	.	PUNCT
fuelectenerg-900	374	1	such	such	DET
fuelectenerg-900	374	2	a	a	DET
fuelectenerg-900	374	3	strong	strong	ADJ
fuelectenerg-900	374	4	field	field	NOUN
fuelectenerg-900	374	5	also	also	ADV
fuelectenerg-900	374	6	causes	cause	VERB
fuelectenerg-900	374	7	circuit	circuit	NOUN
fuelectenerg-900	374	8	loading	loading	NOUN
fuelectenerg-900	374	9	and	and	CCONJ
fuelectenerg-900	374	10	renders	render	VERB
fuelectenerg-900	374	11	the	the	DET
fuelectenerg-900	374	12	setup	setup	NOUN
fuelectenerg-900	374	13	large	large	ADJ
fuelectenerg-900	374	14	and	and	CCONJ
fuelectenerg-900	374	15	expensive	expensive	ADJ
fuelectenerg-900	374	16	.	.	PUNCT
fuelectenerg-900	375	1	purely	purely	ADV
fuelectenerg-900	375	2	capacitive	capacitive	ADJ
fuelectenerg-900	375	3	transduction	transduction	NOUN
fuelectenerg-900	375	4	methods	method	NOUN
fuelectenerg-900	375	5	suffer	suffer	VERB
fuelectenerg-900	375	6	from	from	ADP
fuelectenerg-900	375	7	very	very	ADV
fuelectenerg-900	375	8	low	low	ADJ
fuelectenerg-900	375	9	signal	signal	NOUN
fuelectenerg-900	375	10	levels	level	NOUN
fuelectenerg-900	375	11	and	and	CCONJ
fuelectenerg-900	375	12	parasitic	parasitic	ADJ
fuelectenerg-900	375	13	coupling	coupling	NOUN
fuelectenerg-900	375	14	at	at	ADP
fuelectenerg-900	375	15	very	very	ADV
fuelectenerg-900	375	16	high	high	ADJ
fuelectenerg-900	375	17	frequencies	frequency	NOUN
fuelectenerg-900	375	18	.	.	PUNCT
fuelectenerg-900	376	1	optical	optical	ADJ
fuelectenerg-900	376	2	transduction	transduction	NOUN
fuelectenerg-900	376	3	can	can	AUX
fuelectenerg-900	376	4	not	not	PART
fuelectenerg-900	376	5	be	be	AUX
fuelectenerg-900	376	6	realized	realize	VERB
fuelectenerg-900	376	7	on	on	ADP
fuelectenerg-900	376	8	-	-	PUNCT
fuelectenerg-900	376	9	chip	chip	NOUN
fuelectenerg-900	376	10	,	,	PUNCT
fuelectenerg-900	376	11	and	and	CCONJ
fuelectenerg-900	376	12	its	its	PRON
fuelectenerg-900	376	13	sensitivity	sensitivity	NOUN
fuelectenerg-900	376	14	decreases	decrease	VERB
fuelectenerg-900	376	15	as	as	SCONJ
fuelectenerg-900	376	16	the	the	DET
fuelectenerg-900	376	17	resonator	resonator	NOUN
fuelectenerg-900	376	18	size	size	NOUN
fuelectenerg-900	376	19	scales	scale	VERB
fuelectenerg-900	376	20	down	down	ADP
fuelectenerg-900	376	21	,	,	PUNCT
fuelectenerg-900	376	22	because	because	SCONJ
fuelectenerg-900	376	23	the	the	DET
fuelectenerg-900	376	24	diameter	diameter	NOUN
fuelectenerg-900	376	25	of	of	ADP
fuelectenerg-900	376	26	the	the	DET
fuelectenerg-900	376	27	focused	focus	VERB
fuelectenerg-900	376	28	beam	beam	NOUN
fuelectenerg-900	376	29	is	be	AUX
fuelectenerg-900	376	30	limited	limit	VERB
fuelectenerg-900	376	31	from	from	ADP
fuelectenerg-900	376	32	below	below	ADP
fuelectenerg-900	376	33	by	by	ADP
fuelectenerg-900	376	34	diffraction	diffraction	NOUN
fuelectenerg-900	376	35	(	(	PUNCT
fuelectenerg-900	376	36	this	this	DET
fuelectenerg-900	376	37	limitation	limitation	NOUN
fuelectenerg-900	376	38	can	can	AUX
fuelectenerg-900	376	39	be	be	AUX
fuelectenerg-900	376	40	overcome	overcome	VERB
fuelectenerg-900	376	41	by	by	ADP
fuelectenerg-900	376	42	using	use	VERB
fuelectenerg-900	376	43	waveguides	waveguide	NOUN
fuelectenerg-900	376	44	of	of	ADP
fuelectenerg-900	376	45	a	a	DET
fuelectenerg-900	376	46	submicron	submicron	NOUN
fuelectenerg-900	376	47	cross	cross	NOUN
fuelectenerg-900	376	48	-	-	NOUN
fuelectenerg-900	376	49	section	section	NOUN
fuelectenerg-900	376	50	,	,	PUNCT
fuelectenerg-900	376	51	located	locate	VERB
fuelectenerg-900	376	52	on	on	ADP
fuelectenerg-900	376	53	the	the	DET
fuelectenerg-900	376	54	substrate	substrate	NOUN
fuelectenerg-900	376	55	near	near	ADP
fuelectenerg-900	376	56	the	the	DET
fuelectenerg-900	376	57	resonator	resonator	NOUN
fuelectenerg-900	376	58	)	)	PUNCT
fuelectenerg-900	376	59	.	.	PUNCT
fuelectenerg-900	377	1	photonic	photonic	ADJ
fuelectenerg-900	377	2	method	method	NOUN
fuelectenerg-900	377	3	implies	imply	VERB
fuelectenerg-900	377	4	significant	significant	ADJ
fuelectenerg-900	377	5	fabrication	fabrication	NOUN
fuelectenerg-900	377	6	difficulties	difficulty	NOUN
fuelectenerg-900	377	7	for	for	ADP
fuelectenerg-900	377	8	dimensions	dimension	NOUN
fuelectenerg-900	377	9	of	of	ADP
fuelectenerg-900	377	10	the	the	DET
fuelectenerg-900	377	11	order	order	NOUN
fuelectenerg-900	377	12	of	of	ADP
fuelectenerg-900	377	13	10	10	NUM
fuelectenerg-900	377	14	nm	nm	NOUN
fuelectenerg-900	377	15	and	and	CCONJ
fuelectenerg-900	377	16	below	below	ADV
fuelectenerg-900	377	17	.	.	PUNCT
fuelectenerg-900	378	1	promising	promise	VERB
fuelectenerg-900	378	2	results	result	NOUN
fuelectenerg-900	378	3	have	have	AUX
fuelectenerg-900	378	4	been	be	AUX
fuelectenerg-900	378	5	reported	report	VERB
fuelectenerg-900	378	6	regarding	regard	VERB
fuelectenerg-900	378	7	optical	optical	ADJ
fuelectenerg-900	378	8	multiplexing	multiplexing	NOUN
fuelectenerg-900	378	9	techniques	technique	NOUN
fuelectenerg-900	378	10	.	.	PUNCT
fuelectenerg-900	379	1	the	the	DET
fuelectenerg-900	379	2	transduction	transduction	NOUN
fuelectenerg-900	379	3	efficiency	efficiency	NOUN
fuelectenerg-900	379	4	of	of	ADP
fuelectenerg-900	379	5	the	the	DET
fuelectenerg-900	379	6	piezoelectric	piezoelectric	NOUN
fuelectenerg-900	379	7	method	method	NOUN
fuelectenerg-900	379	8	is	be	AUX
fuelectenerg-900	379	9	very	very	ADV
fuelectenerg-900	379	10	high	high	ADJ
fuelectenerg-900	379	11	and	and	CCONJ
fuelectenerg-900	379	12	it	it	PRON
fuelectenerg-900	379	13	is	be	AUX
fuelectenerg-900	379	14	extensively	extensively	ADV
fuelectenerg-900	379	15	used	use	VERB
fuelectenerg-900	379	16	in	in	ADP
fuelectenerg-900	379	17	bulk	bulk	ADJ
fuelectenerg-900	379	18	mode	mode	NOUN
fuelectenerg-900	379	19	mems	mem	NOUN
fuelectenerg-900	379	20	resonators	resonator	NOUN
fuelectenerg-900	379	21	.	.	PUNCT
fuelectenerg-900	380	1	however	however	ADV
fuelectenerg-900	380	2	,	,	PUNCT
fuelectenerg-900	380	3	the	the	DET
fuelectenerg-900	380	4	method	method	NOUN
fuelectenerg-900	380	5	is	be	AUX
fuelectenerg-900	380	6	less	less	ADV
fuelectenerg-900	380	7	convenient	convenient	ADJ
fuelectenerg-900	380	8	for	for	ADP
fuelectenerg-900	380	9	small	small	ADJ
fuelectenerg-900	380	10	structures	structure	NOUN
fuelectenerg-900	380	11	as	as	SCONJ
fuelectenerg-900	380	12	the	the	DET
fuelectenerg-900	380	13	crystalline	crystalline	NOUN
fuelectenerg-900	380	14	structure	structure	NOUN
fuelectenerg-900	380	15	must	must	AUX
fuelectenerg-900	380	16	be	be	AUX
fuelectenerg-900	380	17	maintained	maintain	VERB
fuelectenerg-900	380	18	for	for	ADP
fuelectenerg-900	380	19	a	a	DET
fuelectenerg-900	380	20	material	material	NOUN
fuelectenerg-900	380	21	to	to	PART
fuelectenerg-900	380	22	be	be	AUX
fuelectenerg-900	380	23	piezoelectric	piezoelectric	ADJ
fuelectenerg-900	380	24	,	,	PUNCT
fuelectenerg-900	380	25	thus	thus	ADV
fuelectenerg-900	380	26	limiting	limit	VERB
fuelectenerg-900	380	27	the	the	DET
fuelectenerg-900	380	28	lowest	low	ADJ
fuelectenerg-900	380	29	possible	possible	ADJ
fuelectenerg-900	380	30	device	device	NOUN
fuelectenerg-900	380	31	thickness	thickness	NOUN
fuelectenerg-900	380	32	.	.	PUNCT
fuelectenerg-900	381	1	nevertheless	nevertheless	ADV
fuelectenerg-900	381	2	,	,	PUNCT
fuelectenerg-900	381	3	both	both	PRON
fuelectenerg-900	381	4	nems	nem	NOUN
fuelectenerg-900	381	5	cantilevers	cantilever	NOUN
fuelectenerg-900	381	6	and	and	CCONJ
fuelectenerg-900	381	7	doubly	doubly	ADV
fuelectenerg-900	381	8	-	-	PUNCT
fuelectenerg-900	381	9	clamped	clamp	VERB
fuelectenerg-900	381	10	beams	beam	NOUN
fuelectenerg-900	381	11	have	have	AUX
fuelectenerg-900	381	12	been	be	AUX
fuelectenerg-900	381	13	successfully	successfully	ADV
fuelectenerg-900	381	14	demonstrated	demonstrate	VERB
fuelectenerg-900	381	15	with	with	ADP
fuelectenerg-900	381	16	pe	pe	PROPN
fuelectenerg-900	381	17	layers	layer	NOUN
fuelectenerg-900	381	18	as	as	ADV
fuelectenerg-900	381	19	thin	thin	ADJ
fuelectenerg-900	381	20	as	as	ADP
fuelectenerg-900	381	21	100	100	NUM
fuelectenerg-900	381	22	nm	nm	NOUN
fuelectenerg-900	381	23	,	,	PUNCT
fuelectenerg-900	381	24	proving	prove	VERB
fuelectenerg-900	381	25	that	that	SCONJ
fuelectenerg-900	381	26	pe	pe	PROPN
fuelectenerg-900	381	27	layers	layer	NOUN
fuelectenerg-900	381	28	can	can	AUX
fuelectenerg-900	381	29	be	be	AUX
fuelectenerg-900	381	30	used	use	VERB
fuelectenerg-900	381	31	as	as	ADP
fuelectenerg-900	381	32	efficient	efficient	ADJ
fuelectenerg-900	381	33	nanoscale	nanoscale	NOUN
fuelectenerg-900	381	34	transducers	transducer	NOUN
fuelectenerg-900	381	35	[	[	X
fuelectenerg-900	381	36	77	77	NUM
fuelectenerg-900	381	37	]	]	PUNCT
fuelectenerg-900	381	38	.	.	PUNCT
fuelectenerg-900	382	1	intrinsic	intrinsic	ADJ
fuelectenerg-900	382	2	amplification	amplification	NOUN
fuelectenerg-900	382	3	mechanisms	mechanism	NOUN
fuelectenerg-900	382	4	such	such	ADJ
fuelectenerg-900	382	5	as	as	ADP
fuelectenerg-900	382	6	transistor	transistor	NOUN
fuelectenerg-900	382	7	-	-	PUNCT
fuelectenerg-900	382	8	based	base	VERB
fuelectenerg-900	382	9	charge	charge	NOUN
fuelectenerg-900	382	10	modulation	modulation	NOUN
fuelectenerg-900	382	11	are	be	AUX
fuelectenerg-900	382	12	promising	promise	VERB
fuelectenerg-900	382	13	at	at	ADP
fuelectenerg-900	382	14	room	room	NOUN
fuelectenerg-900	382	15	temperatures	temperature	NOUN
fuelectenerg-900	382	16	.	.	PUNCT
fuelectenerg-900	383	1	pronounced	pronounce	VERB
fuelectenerg-900	383	2	piezoresistive	piezoresistive	ADJ
fuelectenerg-900	383	3	effect	effect	NOUN
fuelectenerg-900	383	4	in	in	ADP
fuelectenerg-900	383	5	doped	dope	VERB
fuelectenerg-900	383	6	si	si	PROPN
fuelectenerg-900	383	7	nanowires	nanowire	NOUN
fuelectenerg-900	383	8	due	due	ADJ
fuelectenerg-900	383	9	to	to	ADP
fuelectenerg-900	383	10	longitudinal	longitudinal	ADJ
fuelectenerg-900	383	11	strain	strain	NOUN
fuelectenerg-900	383	12	enables	enable	VERB
fuelectenerg-900	383	13	integrated	integrate	VERB
fuelectenerg-900	383	14	piezoresistive	piezoresistive	ADJ
fuelectenerg-900	383	15	self	self	NOUN
fuelectenerg-900	383	16	-	-	PUNCT
fuelectenerg-900	383	17	sensing	sensing	NOUN
fuelectenerg-900	383	18	of	of	ADP
fuelectenerg-900	383	19	strain	strain	NOUN
fuelectenerg-900	383	20	or	or	CCONJ
fuelectenerg-900	383	21	displacement	displacement	NOUN
fuelectenerg-900	383	22	(	(	PUNCT
fuelectenerg-900	383	23	a	a	DET
fuelectenerg-900	383	24	nanowire	nanowire	NOUN
fuelectenerg-900	383	25	without	without	ADP
fuelectenerg-900	383	26	patterned	pattern	VERB
fuelectenerg-900	383	27	piezoresistor	piezoresistor	NOUN
fuelectenerg-900	383	28	loop	loop	NOUN
fuelectenerg-900	383	29	is	be	AUX
fuelectenerg-900	383	30	a	a	DET
fuelectenerg-900	383	31	transducer	transducer	NOUN
fuelectenerg-900	383	32	)	)	PUNCT
fuelectenerg-900	384	1	[	[	X
fuelectenerg-900	384	2	84	84	NUM
fuelectenerg-900	384	3	]	]	PUNCT
fuelectenerg-900	384	4	.	.	PUNCT
fuelectenerg-900	385	1	some	some	DET
fuelectenerg-900	385	2	other	other	ADJ
fuelectenerg-900	385	3	methods	method	NOUN
fuelectenerg-900	385	4	(	(	PUNCT
fuelectenerg-900	385	5	based	base	VERB
fuelectenerg-900	385	6	on	on	ADP
fuelectenerg-900	385	7	set	set	NOUN
fuelectenerg-900	385	8	or	or	CCONJ
fuelectenerg-900	385	9	superconductive	superconductive	ADJ
fuelectenerg-900	385	10	microwave	microwave	NOUN
fuelectenerg-900	385	11	cavity	cavity	NOUN
fuelectenerg-900	385	12	)	)	PUNCT
fuelectenerg-900	385	13	are	be	AUX
fuelectenerg-900	385	14	used	use	VERB
fuelectenerg-900	385	15	only	only	ADV
fuelectenerg-900	385	16	at	at	ADP
fuelectenerg-900	385	17	low	low	ADJ
fuelectenerg-900	385	18	temperatures	temperature	NOUN
fuelectenerg-900	385	19	[	[	X
fuelectenerg-900	385	20	85	85	NUM
fuelectenerg-900	385	21	]	]	PUNCT
fuelectenerg-900	385	22	,	,	PUNCT
fuelectenerg-900	385	23	and	and	CCONJ
fuelectenerg-900	385	24	are	be	AUX
fuelectenerg-900	385	25	difficult	difficult	ADJ
fuelectenerg-900	385	26	to	to	PART
fuelectenerg-900	385	27	implement	implement	VERB
fuelectenerg-900	385	28	.	.	PUNCT
fuelectenerg-900	386	1	one	one	NUM
fuelectenerg-900	386	2	of	of	ADP
fuelectenerg-900	386	3	interesting	interesting	ADJ
fuelectenerg-900	386	4	new	new	ADJ
fuelectenerg-900	386	5	all	all	ADV
fuelectenerg-900	386	6	-	-	PUNCT
fuelectenerg-900	386	7	on	on	ADP
fuelectenerg-900	386	8	-	-	PUNCT
fuelectenerg-900	386	9	chip	chip	NOUN
fuelectenerg-900	386	10	solutions	solution	NOUN
fuelectenerg-900	386	11	applicable	applicable	ADJ
fuelectenerg-900	386	12	at	at	ADP
fuelectenerg-900	386	13	room	room	NOUN
fuelectenerg-900	386	14	temperature	temperature	NOUN
fuelectenerg-900	386	15	is	be	AUX
fuelectenerg-900	386	16	,	,	PUNCT
fuelectenerg-900	386	17	for	for	ADP
fuelectenerg-900	386	18	example	example	NOUN
fuelectenerg-900	386	19	,	,	PUNCT
fuelectenerg-900	386	20	a	a	DET
fuelectenerg-900	386	21	self	self	NOUN
fuelectenerg-900	386	22	-	-	PUNCT
fuelectenerg-900	386	23	transducing	transduce	VERB
fuelectenerg-900	386	24	nems	nem	NOUN
fuelectenerg-900	386	25	system	system	NOUN
fuelectenerg-900	386	26	based	base	VERB
fuelectenerg-900	386	27	on	on	ADP
fuelectenerg-900	386	28	the	the	DET
fuelectenerg-900	386	29	cointegration	cointegration	NOUN
fuelectenerg-900	386	30	of	of	ADP
fuelectenerg-900	386	31	a	a	DET
fuelectenerg-900	386	32	finfet	finfet	ADJ
fuelectenerg-900	386	33	transistor	transistor	NOUN
fuelectenerg-900	386	34	and	and	CCONJ
fuelectenerg-900	386	35	a	a	DET
fuelectenerg-900	386	36	suspended	suspend	VERB
fuelectenerg-900	386	37	doubly	doubly	ADV
fuelectenerg-900	386	38	-	-	PUNCT
fuelectenerg-900	386	39	clamped	clamp	VERB
fuelectenerg-900	386	40	beam	beam	NOUN
fuelectenerg-900	386	41	silicon	silicon	NOUN
fuelectenerg-900	386	42	resonator	resonator	NOUN
fuelectenerg-900	386	43	[	[	X
fuelectenerg-900	386	44	86	86	NUM
fuelectenerg-900	386	45	]	]	PUNCT
fuelectenerg-900	386	46	.	.	PUNCT
fuelectenerg-900	387	1	in	in	ADP
fuelectenerg-900	387	2	this	this	DET
fuelectenerg-900	387	3	example	example	NOUN
fuelectenerg-900	387	4	electrostatic	electrostatic	ADJ
fuelectenerg-900	387	5	actuation	actuation	NOUN
fuelectenerg-900	387	6	and	and	CCONJ
fuelectenerg-900	387	7	transistor	transistor	NOUN
fuelectenerg-900	387	8	-	-	PUNCT
fuelectenerg-900	387	9	based	base	VERB
fuelectenerg-900	387	10	detection	detection	NOUN
fuelectenerg-900	387	11	of	of	ADP
fuelectenerg-900	387	12	the	the	DET
fuelectenerg-900	387	13	resonator	resonator	NOUN
fuelectenerg-900	387	14	motion	motion	NOUN
fuelectenerg-900	387	15	are	be	AUX
fuelectenerg-900	387	16	used	use	VERB
fuelectenerg-900	387	17	.	.	PUNCT
fuelectenerg-900	388	1	there	there	PRON
fuelectenerg-900	388	2	are	be	VERB
fuelectenerg-900	388	3	significant	significant	ADJ
fuelectenerg-900	388	4	benefits	benefit	NOUN
fuelectenerg-900	388	5	of	of	ADP
fuelectenerg-900	388	6	scaling	scale	VERB
fuelectenerg-900	388	7	down	down	ADP
fuelectenerg-900	388	8	the	the	DET
fuelectenerg-900	388	9	dimensions	dimension	NOUN
fuelectenerg-900	388	10	,	,	PUNCT
fuelectenerg-900	388	11	such	such	ADJ
fuelectenerg-900	388	12	as	as	ADP
fuelectenerg-900	388	13	high	high	ADJ
fuelectenerg-900	388	14	speed	speed	NOUN
fuelectenerg-900	388	15	operation	operation	NOUN
fuelectenerg-900	388	16	,	,	PUNCT
fuelectenerg-900	388	17	higher	high	ADJ
fuelectenerg-900	388	18	resonance	resonance	NOUN
fuelectenerg-900	388	19	frequencies	frequency	NOUN
fuelectenerg-900	388	20	,	,	PUNCT
fuelectenerg-900	388	21	higher	high	ADJ
fuelectenerg-900	388	22	component	component	NOUN
fuelectenerg-900	388	23	density	density	NOUN
fuelectenerg-900	388	24	and	and	CCONJ
fuelectenerg-900	388	25	better	well	ADJ
fuelectenerg-900	388	26	integration	integration	NOUN
fuelectenerg-900	388	27	.	.	PUNCT
fuelectenerg-900	389	1	however	however	ADV
fuelectenerg-900	389	2	,	,	PUNCT
fuelectenerg-900	389	3	apart	apart	ADV
fuelectenerg-900	389	4	from	from	ADP
fuelectenerg-900	389	5	the	the	DET
fuelectenerg-900	389	6	mentioned	mention	VERB
fuelectenerg-900	389	7	features	feature	NOUN
fuelectenerg-900	389	8	of	of	ADP
fuelectenerg-900	389	9	nems	nems	PROPN
fuelectenerg-900	389	10	components	component	NOUN
fuelectenerg-900	389	11	,	,	PUNCT
fuelectenerg-900	389	12	which	which	PRON
fuelectenerg-900	389	13	are	be	AUX
fuelectenerg-900	389	14	a	a	DET
fuelectenerg-900	389	15	result	result	NOUN
fuelectenerg-900	389	16	of	of	ADP
fuelectenerg-900	389	17	miniaturization	miniaturization	NOUN
fuelectenerg-900	389	18	,	,	PUNCT
fuelectenerg-900	389	19	and	and	CCONJ
fuelectenerg-900	389	20	beneficial	beneficial	ADJ
fuelectenerg-900	389	21	in	in	ADP
fuelectenerg-900	389	22	high	high	ADJ
fuelectenerg-900	389	23	-	-	PUNCT
fuelectenerg-900	389	24	frequency	frequency	NOUN
fuelectenerg-900	389	25	signal	signal	NOUN
fuelectenerg-900	389	26	processing	processing	NOUN
fuelectenerg-900	389	27	and	and	CCONJ
fuelectenerg-900	389	28	sensing	sense	VERB
fuelectenerg-900	389	29	applications	application	NOUN
fuelectenerg-900	389	30	,	,	PUNCT
fuelectenerg-900	389	31	there	there	PRON
fuelectenerg-900	389	32	are	be	VERB
fuelectenerg-900	389	33	problems	problem	NOUN
fuelectenerg-900	389	34	that	that	PRON
fuelectenerg-900	389	35	remain	remain	VERB
fuelectenerg-900	389	36	to	to	PART
fuelectenerg-900	389	37	be	be	AUX
fuelectenerg-900	389	38	solved	solve	VERB
fuelectenerg-900	389	39	on	on	ADP
fuelectenerg-900	389	40	both	both	CCONJ
fuelectenerg-900	389	41	theoretic	theoretic	ADJ
fuelectenerg-900	389	42	and	and	CCONJ
fuelectenerg-900	389	43	experimental	experimental	ADJ
fuelectenerg-900	389	44	level	level	NOUN
fuelectenerg-900	389	45	.	.	PUNCT
fuelectenerg-900	390	1	the	the	DET
fuelectenerg-900	390	2	studies	study	NOUN
fuelectenerg-900	390	3	in	in	ADP
fuelectenerg-900	390	4	the	the	DET
fuelectenerg-900	390	5	field	field	NOUN
fuelectenerg-900	390	6	of	of	ADP
fuelectenerg-900	390	7	nems	nem	NOUN
fuelectenerg-900	390	8	are	be	AUX
fuelectenerg-900	390	9	at	at	ADP
fuelectenerg-900	390	10	the	the	DET
fuelectenerg-900	390	11	forefront	forefront	NOUN
fuelectenerg-900	390	12	of	of	ADP
fuelectenerg-900	390	13	physical	physical	ADJ
fuelectenerg-900	390	14	and	and	CCONJ
fuelectenerg-900	390	15	engineering	engineering	NOUN
fuelectenerg-900	390	16	sciences	science	NOUN
fuelectenerg-900	390	17	.	.	PUNCT
fuelectenerg-900	391	1	most	most	ADJ
fuelectenerg-900	391	2	developments	development	NOUN
fuelectenerg-900	391	3	in	in	ADP
fuelectenerg-900	391	4	this	this	DET
fuelectenerg-900	391	5	field	field	NOUN
fuelectenerg-900	391	6	are	be	AUX
fuelectenerg-900	391	7	currently	currently	ADV
fuelectenerg-900	391	8	confined	confine	VERB
fuelectenerg-900	391	9	to	to	ADP
fuelectenerg-900	391	10	theoretic	theoretic	NOUN
fuelectenerg-900	391	11	models	model	NOUN
fuelectenerg-900	391	12	,	,	PUNCT
fuelectenerg-900	391	13	simulations	simulation	NOUN
fuelectenerg-900	391	14	and	and	CCONJ
fuelectenerg-900	391	15	laboratory	laboratory	NOUN
fuelectenerg-900	391	16	experiments	experiment	NOUN
fuelectenerg-900	391	17	,	,	PUNCT
fuelectenerg-900	391	18	with	with	ADP
fuelectenerg-900	391	19	nems	nems	PROPN
fuelectenerg-900	391	20	components	component	NOUN
fuelectenerg-900	391	21	in	in	ADP
fuelectenerg-900	391	22	a	a	DET
fuelectenerg-900	391	23	prototype	prototype	NOUN
fuelectenerg-900	391	24	stage	stage	NOUN
fuelectenerg-900	391	25	,	,	PUNCT
fuelectenerg-900	391	26	at	at	ADP
fuelectenerg-900	391	27	best	good	ADJ
fuelectenerg-900	391	28	.	.	PUNCT
fuelectenerg-900	392	1	364	364	NUM
fuelectenerg-900	392	2	i.	i.	NOUN
fuelectenerg-900	392	3	jokić	jokić	PROPN
fuelectenerg-900	392	4	,	,	PUNCT
fuelectenerg-900	392	5	m.	m.	NOUN
fuelectenerg-900	392	6	frantlović	frantlović	NOUN
fuelectenerg-900	392	7	,	,	PUNCT
fuelectenerg-900	392	8	z.	z.	PROPN
fuelectenerg-900	392	9	djurić	djurić	PROPN
fuelectenerg-900	392	10	,	,	PUNCT
fuelectenerg-900	392	11	m.	m.	NOUN
fuelectenerg-900	392	12	l.	l.	PROPN
fuelectenerg-900	392	13	dukić	dukić	VERB
fuelectenerg-900	392	14	some	some	DET
fuelectenerg-900	392	15	solutions	solution	NOUN
fuelectenerg-900	392	16	used	use	VERB
fuelectenerg-900	392	17	in	in	ADP
fuelectenerg-900	392	18	mems	mem	NOUN
fuelectenerg-900	392	19	do	do	AUX
fuelectenerg-900	392	20	not	not	PART
fuelectenerg-900	392	21	scale	scale	VERB
fuelectenerg-900	392	22	well	well	ADV
fuelectenerg-900	392	23	into	into	ADP
fuelectenerg-900	392	24	the	the	DET
fuelectenerg-900	392	25	nems	nem	NOUN
fuelectenerg-900	392	26	domain	domain	NOUN
fuelectenerg-900	392	27	.	.	PUNCT
fuelectenerg-900	393	1	apart	apart	ADV
fuelectenerg-900	393	2	from	from	ADP
fuelectenerg-900	393	3	technological	technological	ADJ
fuelectenerg-900	393	4	issues	issue	NOUN
fuelectenerg-900	393	5	regarding	regard	VERB
fuelectenerg-900	393	6	reproducibility	reproducibility	NOUN
fuelectenerg-900	393	7	and	and	CCONJ
fuelectenerg-900	393	8	control	control	NOUN
fuelectenerg-900	393	9	of	of	ADP
fuelectenerg-900	393	10	surface	surface	NOUN
fuelectenerg-900	393	11	and	and	CCONJ
fuelectenerg-900	393	12	bulk	bulk	ADJ
fuelectenerg-900	393	13	properties	property	NOUN
fuelectenerg-900	393	14	of	of	ADP
fuelectenerg-900	393	15	extremely	extremely	ADV
fuelectenerg-900	393	16	small	small	ADJ
fuelectenerg-900	393	17	structures	structure	NOUN
fuelectenerg-900	393	18	,	,	PUNCT
fuelectenerg-900	393	19	remaining	remain	VERB
fuelectenerg-900	393	20	issues	issue	NOUN
fuelectenerg-900	393	21	include	include	VERB
fuelectenerg-900	393	22	efficient	efficient	ADJ
fuelectenerg-900	393	23	energy	energy	NOUN
fuelectenerg-900	393	24	conversion	conversion	NOUN
fuelectenerg-900	393	25	mechanisms	mechanism	NOUN
fuelectenerg-900	393	26	and	and	CCONJ
fuelectenerg-900	393	27	coupling	coupling	NOUN
fuelectenerg-900	393	28	between	between	ADP
fuelectenerg-900	393	29	nems	nem	NOUN
fuelectenerg-900	393	30	and	and	CCONJ
fuelectenerg-900	393	31	other	other	ADJ
fuelectenerg-900	393	32	components	component	NOUN
fuelectenerg-900	393	33	and	and	CCONJ
fuelectenerg-900	393	34	circuits	circuit	NOUN
fuelectenerg-900	393	35	.	.	PUNCT
fuelectenerg-900	394	1	the	the	DET
fuelectenerg-900	394	2	small	small	ADJ
fuelectenerg-900	394	3	size	size	NOUN
fuelectenerg-900	394	4	of	of	ADP
fuelectenerg-900	394	5	nems	nem	NOUN
fuelectenerg-900	394	6	typically	typically	ADV
fuelectenerg-900	394	7	results	result	VERB
fuelectenerg-900	394	8	in	in	ADP
fuelectenerg-900	394	9	a	a	DET
fuelectenerg-900	394	10	small	small	ADJ
fuelectenerg-900	394	11	motional	motional	ADJ
fuelectenerg-900	394	12	signal	signal	NOUN
fuelectenerg-900	394	13	.	.	PUNCT
fuelectenerg-900	395	1	in	in	ADP
fuelectenerg-900	395	2	spite	spite	NOUN
fuelectenerg-900	395	3	of	of	ADP
fuelectenerg-900	395	4	many	many	ADJ
fuelectenerg-900	395	5	different	different	ADJ
fuelectenerg-900	395	6	transduction	transduction	NOUN
fuelectenerg-900	395	7	methods	method	NOUN
fuelectenerg-900	395	8	applied	apply	VERB
fuelectenerg-900	395	9	in	in	ADP
fuelectenerg-900	395	10	nems	nem	NOUN
fuelectenerg-900	395	11	resonators	resonator	NOUN
fuelectenerg-900	395	12	so	so	ADV
fuelectenerg-900	395	13	far	far	ADV
fuelectenerg-900	395	14	,	,	PUNCT
fuelectenerg-900	395	15	inducing	induce	VERB
fuelectenerg-900	395	16	resonator	resonator	NOUN
fuelectenerg-900	395	17	motion	motion	NOUN
fuelectenerg-900	395	18	and	and	CCONJ
fuelectenerg-900	395	19	detecting	detecting	NOUN
fuelectenerg-900	395	20	of	of	ADP
fuelectenerg-900	395	21	weak	weak	ADJ
fuelectenerg-900	395	22	mechanical	mechanical	ADJ
fuelectenerg-900	395	23	signals	signal	NOUN
fuelectenerg-900	395	24	at	at	ADP
fuelectenerg-900	395	25	very	very	ADV
fuelectenerg-900	395	26	high	high	ADJ
fuelectenerg-900	395	27	oscillation	oscillation	NOUN
fuelectenerg-900	395	28	frequencies	frequency	NOUN
fuelectenerg-900	395	29	,	,	PUNCT
fuelectenerg-900	395	30	at	at	ADP
fuelectenerg-900	395	31	room	room	NOUN
fuelectenerg-900	395	32	temperature	temperature	NOUN
fuelectenerg-900	395	33	and	and	CCONJ
fuelectenerg-900	395	34	with	with	ADP
fuelectenerg-900	395	35	low	low	ADJ
fuelectenerg-900	395	36	power	power	NOUN
fuelectenerg-900	395	37	dissipation	dissipation	NOUN
fuelectenerg-900	395	38	remain	remain	VERB
fuelectenerg-900	395	39	challenging	challenging	ADJ
fuelectenerg-900	395	40	,	,	PUNCT
fuelectenerg-900	395	41	especially	especially	ADV
fuelectenerg-900	395	42	if	if	SCONJ
fuelectenerg-900	395	43	a	a	DET
fuelectenerg-900	395	44	compact	compact	ADJ
fuelectenerg-900	395	45	solution	solution	NOUN
fuelectenerg-900	395	46	,	,	PUNCT
fuelectenerg-900	395	47	such	such	ADJ
fuelectenerg-900	395	48	as	as	ADP
fuelectenerg-900	395	49	a	a	DET
fuelectenerg-900	395	50	system	system	NOUN
fuelectenerg-900	395	51	-	-	PUNCT
fuelectenerg-900	395	52	on	on	ADP
fuelectenerg-900	395	53	-	-	PUNCT
fuelectenerg-900	395	54	chip	chip	NOUN
fuelectenerg-900	395	55	,	,	PUNCT
fuelectenerg-900	395	56	is	be	AUX
fuelectenerg-900	395	57	required	require	VERB
fuelectenerg-900	395	58	.	.	PUNCT
fuelectenerg-900	396	1	small	small	ADJ
fuelectenerg-900	396	2	motional	motional	ADJ
fuelectenerg-900	396	3	signal	signal	NOUN
fuelectenerg-900	396	4	can	can	AUX
fuelectenerg-900	396	5	easily	easily	ADV
fuelectenerg-900	396	6	be	be	AUX
fuelectenerg-900	396	7	overwhelmed	overwhelm	VERB
fuelectenerg-900	396	8	by	by	ADP
fuelectenerg-900	396	9	parasitic	parasitic	ADJ
fuelectenerg-900	396	10	coupling	coupling	NOUN
fuelectenerg-900	396	11	or	or	CCONJ
fuelectenerg-900	396	12	background	background	NOUN
fuelectenerg-900	396	13	noise	noise	NOUN
fuelectenerg-900	396	14	.	.	PUNCT
fuelectenerg-900	397	1	as	as	ADP
fuelectenerg-900	397	2	the	the	DET
fuelectenerg-900	397	3	dimensions	dimension	NOUN
fuelectenerg-900	397	4	decrease	decrease	NOUN
fuelectenerg-900	397	5	,	,	PUNCT
fuelectenerg-900	397	6	so	so	ADV
fuelectenerg-900	397	7	does	do	VERB
fuelectenerg-900	397	8	the	the	DET
fuelectenerg-900	397	9	signal	signal	VERB
fuelectenerg-900	397	10	-	-	PUNCT
fuelectenerg-900	397	11	to	to	ADP
fuelectenerg-900	397	12	-	-	PUNCT
fuelectenerg-900	397	13	noise	noise	NOUN
fuelectenerg-900	397	14	ratio	ratio	NOUN
fuelectenerg-900	397	15	.	.	PUNCT
fuelectenerg-900	398	1	there	there	PRON
fuelectenerg-900	398	2	are	be	VERB
fuelectenerg-900	398	3	also	also	ADV
fuelectenerg-900	398	4	problems	problem	NOUN
fuelectenerg-900	398	5	with	with	ADP
fuelectenerg-900	398	6	energy	energy	NOUN
fuelectenerg-900	398	7	loss	loss	NOUN
fuelectenerg-900	398	8	at	at	ADP
fuelectenerg-900	398	9	clamping	clamp	VERB
fuelectenerg-900	398	10	sites	site	NOUN
fuelectenerg-900	398	11	(	(	PUNCT
fuelectenerg-900	398	12	clamping	clamp	VERB
fuelectenerg-900	398	13	loss	loss	NOUN
fuelectenerg-900	398	14	)	)	PUNCT
fuelectenerg-900	398	15	,	,	PUNCT
fuelectenerg-900	398	16	which	which	PRON
fuelectenerg-900	398	17	increases	increase	VERB
fuelectenerg-900	398	18	with	with	ADP
fuelectenerg-900	398	19	f0	f0	PROPN
fuelectenerg-900	398	20	,	,	PUNCT
fuelectenerg-900	398	21	as	as	ADV
fuelectenerg-900	398	22	well	well	ADV
fuelectenerg-900	398	23	as	as	ADP
fuelectenerg-900	398	24	with	with	ADP
fuelectenerg-900	398	25	surface	surface	NOUN
fuelectenerg-900	398	26	losses	loss	NOUN
fuelectenerg-900	398	27	and	and	CCONJ
fuelectenerg-900	398	28	other	other	ADJ
fuelectenerg-900	398	29	effects	effect	NOUN
fuelectenerg-900	398	30	leading	lead	VERB
fuelectenerg-900	398	31	to	to	ADP
fuelectenerg-900	398	32	the	the	DET
fuelectenerg-900	398	33	increase	increase	NOUN
fuelectenerg-900	398	34	in	in	ADP
fuelectenerg-900	398	35	energy	energy	NOUN
fuelectenerg-900	398	36	dissipation	dissipation	NOUN
fuelectenerg-900	398	37	,	,	PUNCT
fuelectenerg-900	398	38	and	and	CCONJ
fuelectenerg-900	398	39	,	,	PUNCT
fuelectenerg-900	398	40	consequently	consequently	ADV
fuelectenerg-900	398	41	,	,	PUNCT
fuelectenerg-900	398	42	the	the	DET
fuelectenerg-900	398	43	q	q	NOUN
fuelectenerg-900	398	44	factor	factor	NOUN
fuelectenerg-900	398	45	decrease	decrease	NOUN
fuelectenerg-900	398	46	.	.	PUNCT
fuelectenerg-900	399	1	therefore	therefore	ADV
fuelectenerg-900	399	2	,	,	PUNCT
fuelectenerg-900	399	3	there	there	PRON
fuelectenerg-900	399	4	are	be	VERB
fuelectenerg-900	399	5	limits	limit	NOUN
fuelectenerg-900	399	6	to	to	ADP
fuelectenerg-900	399	7	the	the	DET
fuelectenerg-900	399	8	reduction	reduction	NOUN
fuelectenerg-900	399	9	of	of	ADP
fuelectenerg-900	399	10	device	device	NOUN
fuelectenerg-900	399	11	size	size	NOUN
fuelectenerg-900	399	12	.	.	PUNCT
fuelectenerg-900	400	1	q	q	NOUN
fuelectenerg-900	400	2	of	of	ADP
fuelectenerg-900	400	3	nems	nem	NOUN
fuelectenerg-900	400	4	resonators	resonator	NOUN
fuelectenerg-900	400	5	can	can	AUX
fuelectenerg-900	400	6	reach	reach	VERB
fuelectenerg-900	400	7	thousands	thousand	NOUN
fuelectenerg-900	400	8	,	,	PUNCT
fuelectenerg-900	400	9	even	even	ADV
fuelectenerg-900	400	10	tens	ten	NOUN
fuelectenerg-900	400	11	of	of	ADP
fuelectenerg-900	400	12	thousands	thousand	NOUN
fuelectenerg-900	400	13	,	,	PUNCT
fuelectenerg-900	400	14	but	but	CCONJ
fuelectenerg-900	400	15	,	,	PUNCT
fuelectenerg-900	400	16	except	except	SCONJ
fuelectenerg-900	400	17	in	in	ADP
fuelectenerg-900	400	18	rare	rare	ADJ
fuelectenerg-900	400	19	cases	case	NOUN
fuelectenerg-900	400	20	,	,	PUNCT
fuelectenerg-900	400	21	such	such	ADJ
fuelectenerg-900	400	22	q	q	ADJ
fuelectenerg-900	400	23	values	value	NOUN
fuelectenerg-900	400	24	have	have	AUX
fuelectenerg-900	400	25	been	be	AUX
fuelectenerg-900	400	26	reached	reach	VERB
fuelectenerg-900	400	27	only	only	ADV
fuelectenerg-900	400	28	at	at	ADP
fuelectenerg-900	400	29	temperatures	temperature	NOUN
fuelectenerg-900	400	30	below	below	ADP
fuelectenerg-900	400	31	25	25	NUM
fuelectenerg-900	400	32	k.	k.	NOUN
fuelectenerg-900	400	33	a	a	DET
fuelectenerg-900	400	34	sin	sin	NOUN
fuelectenerg-900	400	35	50	50	NUM
fuelectenerg-900	400	36	nm	nm	ADV
fuelectenerg-900	400	37	thick	thick	ADJ
fuelectenerg-900	400	38	square	square	ADJ
fuelectenerg-900	400	39	membrane	membrane	NOUN
fuelectenerg-900	400	40	with	with	ADP
fuelectenerg-900	400	41	the	the	DET
fuelectenerg-900	400	42	fundamental	fundamental	ADJ
fuelectenerg-900	400	43	resonance	resonance	NOUN
fuelectenerg-900	400	44	frequency	frequency	NOUN
fuelectenerg-900	400	45	of	of	ADP
fuelectenerg-900	400	46	133	133	NUM
fuelectenerg-900	400	47	khz	khz	NOUN
fuelectenerg-900	400	48	is	be	AUX
fuelectenerg-900	400	49	an	an	DET
fuelectenerg-900	400	50	example	example	NOUN
fuelectenerg-900	400	51	of	of	ADP
fuelectenerg-900	400	52	a	a	DET
fuelectenerg-900	400	53	nems	nem	NOUN
fuelectenerg-900	400	54	resonator	resonator	VERB
fuelectenerg-900	400	55	with	with	ADP
fuelectenerg-900	400	56	q	q	NOUN
fuelectenerg-900	400	57	of	of	ADP
fuelectenerg-900	400	58	the	the	DET
fuelectenerg-900	400	59	order	order	NOUN
fuelectenerg-900	400	60	of	of	ADP
fuelectenerg-900	400	61	10	10	NUM
fuelectenerg-900	400	62	6	6	NUM
fuelectenerg-900	400	63	at	at	ADP
fuelectenerg-900	400	64	the	the	DET
fuelectenerg-900	400	65	room	room	NOUN
fuelectenerg-900	400	66	temperature	temperature	NOUN
fuelectenerg-900	401	1	[	[	X
fuelectenerg-900	401	2	87	87	NUM
fuelectenerg-900	401	3	]	]	PUNCT
fuelectenerg-900	401	4	.	.	PUNCT
fuelectenerg-900	402	1	however	however	ADV
fuelectenerg-900	402	2	,	,	PUNCT
fuelectenerg-900	402	3	attaining	attain	VERB
fuelectenerg-900	402	4	a	a	DET
fuelectenerg-900	402	5	high	high	ADJ
fuelectenerg-900	402	6	fundamental	fundamental	ADJ
fuelectenerg-900	402	7	resonance	resonance	NOUN
fuelectenerg-900	402	8	frequency	frequency	NOUN
fuelectenerg-900	402	9	without	without	ADP
fuelectenerg-900	402	10	decreasing	decrease	VERB
fuelectenerg-900	402	11	the	the	DET
fuelectenerg-900	402	12	q	q	NOUN
fuelectenerg-900	402	13	value	value	NOUN
fuelectenerg-900	402	14	is	be	AUX
fuelectenerg-900	402	15	the	the	DET
fuelectenerg-900	402	16	remaining	remain	VERB
fuelectenerg-900	402	17	problem	problem	NOUN
fuelectenerg-900	402	18	in	in	ADP
fuelectenerg-900	402	19	nems	nems	PROPN
fuelectenerg-900	402	20	development	development	PROPN
fuelectenerg-900	402	21	.	.	PUNCT
fuelectenerg-900	403	1	as	as	ADP
fuelectenerg-900	403	2	in	in	ADP
fuelectenerg-900	403	3	mems	mem	NOUN
fuelectenerg-900	403	4	,	,	PUNCT
fuelectenerg-900	403	5	solutions	solution	NOUN
fuelectenerg-900	403	6	are	be	AUX
fuelectenerg-900	403	7	also	also	ADV
fuelectenerg-900	403	8	needed	need	VERB
fuelectenerg-900	403	9	for	for	ADP
fuelectenerg-900	403	10	reduction	reduction	NOUN
fuelectenerg-900	403	11	of	of	ADP
fuelectenerg-900	403	12	the	the	DET
fuelectenerg-900	403	13	series	series	NOUN
fuelectenerg-900	403	14	resistance	resistance	NOUN
fuelectenerg-900	403	15	of	of	ADP
fuelectenerg-900	403	16	nems	nem	NOUN
fuelectenerg-900	403	17	resonators	resonator	NOUN
fuelectenerg-900	403	18	and	and	CCONJ
fuelectenerg-900	403	19	improvement	improvement	NOUN
fuelectenerg-900	403	20	of	of	ADP
fuelectenerg-900	403	21	their	their	PRON
fuelectenerg-900	403	22	power	power	NOUN
fuelectenerg-900	403	23	handling	handling	NOUN
fuelectenerg-900	403	24	.	.	PUNCT
fuelectenerg-900	404	1	from	from	ADP
fuelectenerg-900	404	2	the	the	DET
fuelectenerg-900	404	3	theoretical	theoretical	ADJ
fuelectenerg-900	404	4	standpoint	standpoint	NOUN
fuelectenerg-900	404	5	,	,	PUNCT
fuelectenerg-900	404	6	it	it	PRON
fuelectenerg-900	404	7	is	be	AUX
fuelectenerg-900	404	8	important	important	ADJ
fuelectenerg-900	404	9	to	to	PART
fuelectenerg-900	404	10	analyze	analyze	VERB
fuelectenerg-900	404	11	the	the	DET
fuelectenerg-900	404	12	applicability	applicability	NOUN
fuelectenerg-900	404	13	of	of	ADP
fuelectenerg-900	404	14	the	the	DET
fuelectenerg-900	404	15	continuum	continuum	ADJ
fuelectenerg-900	404	16	approach	approach	NOUN
fuelectenerg-900	404	17	to	to	ADP
fuelectenerg-900	404	18	the	the	DET
fuelectenerg-900	404	19	calculation	calculation	NOUN
fuelectenerg-900	404	20	of	of	ADP
fuelectenerg-900	404	21	mechanical	mechanical	ADJ
fuelectenerg-900	404	22	characteristics	characteristic	NOUN
fuelectenerg-900	404	23	of	of	ADP
fuelectenerg-900	404	24	an	an	DET
fuelectenerg-900	404	25	extremely	extremely	ADV
fuelectenerg-900	404	26	small	small	ADJ
fuelectenerg-900	404	27	resonator	resonator	NOUN
fuelectenerg-900	404	28	.	.	PUNCT
fuelectenerg-900	405	1	reduction	reduction	NOUN
fuelectenerg-900	405	2	of	of	ADP
fuelectenerg-900	405	3	the	the	DET
fuelectenerg-900	405	4	noise	noise	NOUN
fuelectenerg-900	405	5	caused	cause	VERB
fuelectenerg-900	405	6	by	by	ADP
fuelectenerg-900	405	7	physical	physical	ADJ
fuelectenerg-900	405	8	effects	effect	NOUN
fuelectenerg-900	405	9	that	that	PRON
fuelectenerg-900	405	10	become	become	AUX
fuelectenerg-900	405	11	pronounced	pronounce	VERB
fuelectenerg-900	405	12	as	as	SCONJ
fuelectenerg-900	405	13	the	the	DET
fuelectenerg-900	405	14	dimensions	dimension	NOUN
fuelectenerg-900	405	15	decrease	decrease	NOUN
fuelectenerg-900	405	16	is	be	AUX
fuelectenerg-900	405	17	another	another	DET
fuelectenerg-900	405	18	important	important	ADJ
fuelectenerg-900	405	19	task	task	NOUN
fuelectenerg-900	405	20	which	which	PRON
fuelectenerg-900	405	21	requires	require	VERB
fuelectenerg-900	405	22	both	both	CCONJ
fuelectenerg-900	405	23	theoretic	theoretic	ADJ
fuelectenerg-900	405	24	and	and	CCONJ
fuelectenerg-900	405	25	experimental	experimental	ADJ
fuelectenerg-900	405	26	research	research	NOUN
fuelectenerg-900	405	27	.	.	PUNCT
fuelectenerg-900	406	1	in	in	ADP
fuelectenerg-900	406	2	mems	mem	NOUN
fuelectenerg-900	406	3	,	,	PUNCT
fuelectenerg-900	406	4	and	and	CCONJ
fuelectenerg-900	406	5	especially	especially	ADV
fuelectenerg-900	406	6	in	in	ADP
fuelectenerg-900	406	7	nems	nem	NOUN
fuelectenerg-900	406	8	resonators	resonator	NOUN
fuelectenerg-900	406	9	,	,	PUNCT
fuelectenerg-900	406	10	additional	additional	ADJ
fuelectenerg-900	406	11	noise	noise	NOUN
fuelectenerg-900	406	12	generating	generating	NOUN
fuelectenerg-900	406	13	mechanisms	mechanism	NOUN
fuelectenerg-900	406	14	exist	exist	VERB
fuelectenerg-900	406	15	that	that	PRON
fuelectenerg-900	406	16	are	be	AUX
fuelectenerg-900	406	17	characteristic	characteristic	ADJ
fuelectenerg-900	406	18	for	for	ADP
fuelectenerg-900	406	19	structures	structure	NOUN
fuelectenerg-900	406	20	of	of	ADP
fuelectenerg-900	406	21	small	small	ADJ
fuelectenerg-900	406	22	dimensions	dimension	NOUN
fuelectenerg-900	406	23	and	and	CCONJ
fuelectenerg-900	406	24	mass	mass	NOUN
fuelectenerg-900	406	25	,	,	PUNCT
fuelectenerg-900	406	26	and	and	CCONJ
fuelectenerg-900	406	27	high	high	ADJ
fuelectenerg-900	406	28	surface	surface	NOUN
fuelectenerg-900	406	29	-	-	PUNCT
fuelectenerg-900	406	30	to	to	ADP
fuelectenerg-900	406	31	-	-	PUNCT
fuelectenerg-900	406	32	volume	volume	NOUN
fuelectenerg-900	406	33	ratio	ratio	NOUN
fuelectenerg-900	406	34	.	.	PUNCT
fuelectenerg-900	407	1	it	it	PRON
fuelectenerg-900	407	2	is	be	AUX
fuelectenerg-900	407	3	therefore	therefore	ADV
fuelectenerg-900	407	4	necessary	necessary	ADJ
fuelectenerg-900	407	5	to	to	PART
fuelectenerg-900	407	6	investigate	investigate	VERB
fuelectenerg-900	407	7	their	their	PRON
fuelectenerg-900	407	8	influence	influence	NOUN
fuelectenerg-900	407	9	on	on	ADP
fuelectenerg-900	407	10	the	the	DET
fuelectenerg-900	407	11	resonator	resonator	NOUN
fuelectenerg-900	407	12	performance	performance	NOUN
fuelectenerg-900	407	13	as	as	ADP
fuelectenerg-900	407	14	a	a	DET
fuelectenerg-900	407	15	function	function	NOUN
fuelectenerg-900	407	16	of	of	ADP
fuelectenerg-900	407	17	dimensions	dimension	NOUN
fuelectenerg-900	407	18	of	of	ADP
fuelectenerg-900	407	19	the	the	DET
fuelectenerg-900	407	20	structures	structure	NOUN
fuelectenerg-900	407	21	and	and	CCONJ
fuelectenerg-900	407	22	the	the	DET
fuelectenerg-900	407	23	operating	operating	NOUN
fuelectenerg-900	407	24	conditions	condition	NOUN
fuelectenerg-900	407	25	.	.	PUNCT
fuelectenerg-900	408	1	in	in	ADP
fuelectenerg-900	408	2	section	section	NOUN
fuelectenerg-900	408	3	3	3	NUM
fuelectenerg-900	408	4	,	,	PUNCT
fuelectenerg-900	408	5	by	by	ADP
fuelectenerg-900	408	6	analyzing	analyze	VERB
fuelectenerg-900	408	7	the	the	DET
fuelectenerg-900	408	8	adsorption	adsorption	NOUN
fuelectenerg-900	408	9	-	-	PUNCT
fuelectenerg-900	408	10	desorption	desorption	NOUN
fuelectenerg-900	408	11	(	(	PUNCT
fuelectenerg-900	408	12	ad	ad	NOUN
fuelectenerg-900	408	13	)	)	PUNCT
fuelectenerg-900	408	14	noise	noise	NOUN
fuelectenerg-900	408	15	that	that	PRON
fuelectenerg-900	408	16	becomes	become	VERB
fuelectenerg-900	408	17	prominent	prominent	ADJ
fuelectenerg-900	408	18	as	as	ADP
fuelectenerg-900	408	19	the	the	DET
fuelectenerg-900	408	20	dimensions	dimension	NOUN
fuelectenerg-900	408	21	and	and	CCONJ
fuelectenerg-900	408	22	mass	mass	NOUN
fuelectenerg-900	408	23	of	of	ADP
fuelectenerg-900	408	24	the	the	DET
fuelectenerg-900	408	25	components	component	NOUN
fuelectenerg-900	408	26	decrease	decrease	NOUN
fuelectenerg-900	408	27	,	,	PUNCT
fuelectenerg-900	408	28	we	we	PRON
fuelectenerg-900	408	29	contribute	contribute	VERB
fuelectenerg-900	408	30	to	to	ADP
fuelectenerg-900	408	31	the	the	DET
fuelectenerg-900	408	32	theory	theory	NOUN
fuelectenerg-900	408	33	of	of	ADP
fuelectenerg-900	408	34	noise	noise	NOUN
fuelectenerg-900	408	35	in	in	ADP
fuelectenerg-900	408	36	mems	mem	NOUN
fuelectenerg-900	408	37	and	and	CCONJ
fuelectenerg-900	408	38	nems	nem	NOUN
fuelectenerg-900	408	39	resonators	resonator	NOUN
fuelectenerg-900	408	40	,	,	PUNCT
fuelectenerg-900	408	41	and	and	CCONJ
fuelectenerg-900	408	42	subsequently	subsequently	ADV
fuelectenerg-900	408	43	to	to	ADP
fuelectenerg-900	408	44	the	the	DET
fuelectenerg-900	408	45	theory	theory	NOUN
fuelectenerg-900	408	46	of	of	ADP
fuelectenerg-900	408	47	phase	phase	NOUN
fuelectenerg-900	408	48	noise	noise	NOUN
fuelectenerg-900	408	49	in	in	ADP
fuelectenerg-900	408	50	oscillators	oscillator	NOUN
fuelectenerg-900	408	51	using	use	VERB
fuelectenerg-900	408	52	rf	rf	ADJ
fuelectenerg-900	408	53	mems	mem	NOUN
fuelectenerg-900	408	54	/	/	SYM
fuelectenerg-900	408	55	nems	nem	NOUN
fuelectenerg-900	408	56	resonators	resonator	NOUN
fuelectenerg-900	408	57	as	as	ADP
fuelectenerg-900	408	58	frequency	frequency	NOUN
fuelectenerg-900	408	59	determining	determine	VERB
fuelectenerg-900	408	60	elements	element	NOUN
fuelectenerg-900	408	61	.	.	PUNCT
fuelectenerg-900	409	1	2.4	2.4	NUM
fuelectenerg-900	409	2	.	.	PUNCT
fuelectenerg-900	410	1	rf	rf	NOUN
fuelectenerg-900	410	2	nems	nem	NOUN
fuelectenerg-900	410	3	resonators	resonator	NOUN
fuelectenerg-900	410	4	based	base	VERB
fuelectenerg-900	410	5	on	on	ADP
fuelectenerg-900	410	6	2d	2d	NUM
fuelectenerg-900	410	7	crystals	crystal	NOUN
fuelectenerg-900	410	8	recent	recent	ADJ
fuelectenerg-900	410	9	years	year	NOUN
fuelectenerg-900	410	10	have	have	AUX
fuelectenerg-900	410	11	seen	see	VERB
fuelectenerg-900	410	12	increasing	increase	VERB
fuelectenerg-900	410	13	interest	interest	NOUN
fuelectenerg-900	410	14	in	in	ADP
fuelectenerg-900	410	15	nems	nem	NOUN
fuelectenerg-900	410	16	that	that	PRON
fuelectenerg-900	410	17	utilize	utilize	VERB
fuelectenerg-900	410	18	carbon	carbon	NOUN
fuelectenerg-900	410	19	nanostructures	nanostructure	NOUN
fuelectenerg-900	410	20	,	,	PUNCT
fuelectenerg-900	410	21	such	such	ADJ
fuelectenerg-900	410	22	as	as	ADP
fuelectenerg-900	410	23	one	one	NUM
fuelectenerg-900	410	24	-	-	PUNCT
fuelectenerg-900	410	25	dimensional	dimensional	ADJ
fuelectenerg-900	410	26	(	(	PUNCT
fuelectenerg-900	410	27	1d	1d	NUM
fuelectenerg-900	410	28	)	)	PUNCT
fuelectenerg-900	410	29	nanotubes	nanotube	NOUN
fuelectenerg-900	410	30	or	or	CCONJ
fuelectenerg-900	410	31	two	two	NUM
fuelectenerg-900	410	32	-	-	PUNCT
fuelectenerg-900	410	33	dimensional	dimensional	ADJ
fuelectenerg-900	410	34	(	(	PUNCT
fuelectenerg-900	410	35	2d	2d	NOUN
fuelectenerg-900	410	36	)	)	PUNCT
fuelectenerg-900	410	37	beams	beam	NOUN
fuelectenerg-900	410	38	or	or	CCONJ
fuelectenerg-900	410	39	membranes	membrane	NOUN
fuelectenerg-900	410	40	,	,	PUNCT
fuelectenerg-900	410	41	as	as	ADP
fuelectenerg-900	410	42	building	build	VERB
fuelectenerg-900	410	43	blocks	block	NOUN
fuelectenerg-900	410	44	.	.	PUNCT
fuelectenerg-900	411	1	these	these	DET
fuelectenerg-900	411	2	structures	structure	NOUN
fuelectenerg-900	411	3	are	be	AUX
fuelectenerg-900	411	4	based	base	VERB
fuelectenerg-900	411	5	on	on	ADP
fuelectenerg-900	411	6	graphene	graphene	NOUN
fuelectenerg-900	411	7	,	,	PUNCT
fuelectenerg-900	411	8	a	a	DET
fuelectenerg-900	411	9	planar	planar	ADJ
fuelectenerg-900	411	10	sheet	sheet	NOUN
fuelectenerg-900	411	11	of	of	ADP
fuelectenerg-900	411	12	carbon	carbon	NOUN
fuelectenerg-900	411	13	atoms	atom	NOUN
fuelectenerg-900	411	14	arranged	arrange	VERB
fuelectenerg-900	411	15	in	in	ADP
fuelectenerg-900	411	16	a	a	DET
fuelectenerg-900	411	17	honeycomb	honeycomb	NOUN
fuelectenerg-900	411	18	lattice	lattice	NOUN
fuelectenerg-900	411	19	.	.	PUNCT
fuelectenerg-900	412	1	graphene	graphene	NOUN
fuelectenerg-900	412	2	structures	structure	NOUN
fuelectenerg-900	412	3	,	,	PUNCT
fuelectenerg-900	412	4	consisting	consist	VERB
fuelectenerg-900	412	5	of	of	ADP
fuelectenerg-900	412	6	one	one	NUM
fuelectenerg-900	412	7	or	or	CCONJ
fuelectenerg-900	412	8	a	a	DET
fuelectenerg-900	412	9	few	few	ADJ
fuelectenerg-900	412	10	of	of	ADP
fuelectenerg-900	412	11	atomic	atomic	ADJ
fuelectenerg-900	412	12	layers	layer	NOUN
fuelectenerg-900	412	13	,	,	PUNCT
fuelectenerg-900	412	14	are	be	AUX
fuelectenerg-900	412	15	intrinsically	intrinsically	ADV
fuelectenerg-900	412	16	nanoscale	nanoscale	NOUN
fuelectenerg-900	412	17	.	.	PUNCT
fuelectenerg-900	413	1	since	since	SCONJ
fuelectenerg-900	413	2	the	the	DET
fuelectenerg-900	413	3	carbon	carbon	NOUN
fuelectenerg-900	413	4	-	-	PUNCT
fuelectenerg-900	413	5	based	base	VERB
fuelectenerg-900	413	6	nanostructures	nanostructure	NOUN
fuelectenerg-900	413	7	emerged	emerge	VERB
fuelectenerg-900	413	8	,	,	PUNCT
fuelectenerg-900	413	9	a	a	DET
fuelectenerg-900	413	10	continued	continue	VERB
fuelectenerg-900	413	11	miniaturization	miniaturization	NOUN
fuelectenerg-900	413	12	of	of	ADP
fuelectenerg-900	413	13	resonant	resonant	ADJ
fuelectenerg-900	413	14	nems	nem	NOUN
fuelectenerg-900	413	15	has	have	AUX
fuelectenerg-900	413	16	advanced	advance	VERB
fuelectenerg-900	413	17	into	into	ADP
fuelectenerg-900	413	18	atomically	atomically	ADV
fuelectenerg-900	413	19	thin	thin	ADJ
fuelectenerg-900	413	20	2d	2d	NOUN
fuelectenerg-900	413	21	or	or	CCONJ
fuelectenerg-900	413	22	1d	1d	NUM
fuelectenerg-900	413	23	nems	nem	NOUN
fuelectenerg-900	413	24	.	.	PUNCT
fuelectenerg-900	414	1	rf	rf	VERB
fuelectenerg-900	414	2	mems	mem	NOUN
fuelectenerg-900	414	3	/	/	SYM
fuelectenerg-900	414	4	nems	nem	NOUN
fuelectenerg-900	414	5	resonators	resonator	NOUN
fuelectenerg-900	414	6	for	for	ADP
fuelectenerg-900	414	7	wireless	wireless	ADJ
fuelectenerg-900	414	8	communication	communication	NOUN
fuelectenerg-900	414	9	systems	system	NOUN
fuelectenerg-900	414	10	and	and	CCONJ
fuelectenerg-900	414	11	adsorption	adsorption	NOUN
fuelectenerg-900	414	12	-	-	PUNCT
fuelectenerg-900	414	13	desorption	desorption	NOUN
fuelectenerg-900	414	14	phase	phase	NOUN
fuelectenerg-900	414	15	noise	noise	NOUN
fuelectenerg-900	414	16	365	365	NUM
fuelectenerg-900	414	17	graphene	graphene	NOUN
fuelectenerg-900	414	18	has	have	VERB
fuelectenerg-900	414	19	high	high	ADJ
fuelectenerg-900	414	20	2d	2d	NUM
fuelectenerg-900	414	21	elastic	elastic	ADJ
fuelectenerg-900	414	22	stiffness	stiffness	NOUN
fuelectenerg-900	414	23	(	(	PUNCT
fuelectenerg-900	414	24	2d	2d	NUM
fuelectenerg-900	414	25	young	young	PROPN
fuelectenerg-900	414	26	's	's	PART
fuelectenerg-900	414	27	modulus	modulus	ADJ
fuelectenerg-900	414	28	e2d=340	e2d=340	PROPN
fuelectenerg-900	414	29	n	n	CCONJ
fuelectenerg-900	414	30	/	/	SYM
fuelectenerg-900	414	31	m	m	PROPN
fuelectenerg-900	414	32	,	,	PUNCT
fuelectenerg-900	414	33	corresponding	correspond	VERB
fuelectenerg-900	414	34	to	to	ADP
fuelectenerg-900	414	35	e=1	e=1	PROPN
fuelectenerg-900	414	36	tpa	tpa	PROPN
fuelectenerg-900	414	37	reduced	reduce	VERB
fuelectenerg-900	414	38	to	to	ADP
fuelectenerg-900	414	39	a	a	DET
fuelectenerg-900	414	40	single	single	ADJ
fuelectenerg-900	414	41	atomic	atomic	ADJ
fuelectenerg-900	414	42	layer	layer	NOUN
fuelectenerg-900	414	43	)	)	PUNCT
fuelectenerg-900	414	44	and	and	CCONJ
fuelectenerg-900	414	45	high	high	ADJ
fuelectenerg-900	414	46	breaking	break	VERB
fuelectenerg-900	414	47	strain	strain	NOUN
fuelectenerg-900	414	48	(	(	PUNCT
fuelectenerg-900	414	49	25	25	NUM
fuelectenerg-900	414	50	%	%	NOUN
fuelectenerg-900	414	51	)	)	PUNCT
fuelectenerg-900	414	52	,	,	PUNCT
fuelectenerg-900	414	53	which	which	PRON
fuelectenerg-900	414	54	exceed	exceed	VERB
fuelectenerg-900	414	55	the	the	DET
fuelectenerg-900	414	56	values	value	NOUN
fuelectenerg-900	414	57	for	for	ADP
fuelectenerg-900	414	58	any	any	PRON
fuelectenerg-900	414	59	of	of	ADP
fuelectenerg-900	414	60	the	the	DET
fuelectenerg-900	414	61	thin	thin	ADJ
fuelectenerg-900	414	62	-	-	PUNCT
fuelectenerg-900	414	63	film	film	NOUN
fuelectenerg-900	414	64	materials	material	NOUN
fuelectenerg-900	414	65	currently	currently	ADV
fuelectenerg-900	414	66	used	use	VERB
fuelectenerg-900	414	67	for	for	ADP
fuelectenerg-900	414	68	nems	nem	NOUN
fuelectenerg-900	414	69	.	.	PUNCT
fuelectenerg-900	415	1	it	it	PRON
fuelectenerg-900	415	2	also	also	ADV
fuelectenerg-900	415	3	has	have	VERB
fuelectenerg-900	415	4	a	a	DET
fuelectenerg-900	415	5	low	low	ADJ
fuelectenerg-900	415	6	mass	mass	NOUN
fuelectenerg-900	415	7	(	(	PUNCT
fuelectenerg-900	415	8	2d=7.410	2d=7.410	X
fuelectenerg-900	415	9	-7	-7	INTJ
fuelectenerg-900	415	10	kg	kg	X
fuelectenerg-900	415	11	/	/	SYM
fuelectenerg-900	415	12	m	m	PROPN
fuelectenerg-900	415	13	2	2	NUM
fuelectenerg-900	415	14	)	)	PUNCT
fuelectenerg-900	415	15	and	and	CCONJ
fuelectenerg-900	415	16	a	a	DET
fuelectenerg-900	415	17	high	high	ADJ
fuelectenerg-900	415	18	e	e	NOUN
fuelectenerg-900	415	19	/	/	SYM
fuelectenerg-900	415	20	ρ	ρ	NOUN
fuelectenerg-900	415	21	ratio	ratio	NOUN
fuelectenerg-900	415	22	.	.	PUNCT
fuelectenerg-900	416	1	the	the	DET
fuelectenerg-900	416	2	strength	strength	NOUN
fuelectenerg-900	416	3	of	of	ADP
fuelectenerg-900	416	4	carbon	carbon	NOUN
fuelectenerg-900	416	5	-	-	PUNCT
fuelectenerg-900	416	6	carbon	carbon	NOUN
fuelectenerg-900	416	7	bond	bond	NOUN
fuelectenerg-900	416	8	makes	make	VERB
fuelectenerg-900	416	9	graphene	graphene	VERB
fuelectenerg-900	416	10	quite	quite	ADV
fuelectenerg-900	416	11	flexible	flexible	ADJ
fuelectenerg-900	416	12	.	.	PUNCT
fuelectenerg-900	417	1	being	be	AUX
fuelectenerg-900	417	2	atomically	atomically	ADV
fuelectenerg-900	417	3	thick	thick	ADJ
fuelectenerg-900	417	4	,	,	PUNCT
fuelectenerg-900	417	5	graphene	graphene	ADJ
fuelectenerg-900	417	6	structures	structure	NOUN
fuelectenerg-900	417	7	have	have	VERB
fuelectenerg-900	417	8	extremely	extremely	ADV
fuelectenerg-900	417	9	high	high	ADJ
fuelectenerg-900	417	10	l	l	NOUN
fuelectenerg-900	417	11	/	/	SYM
fuelectenerg-900	417	12	h	h	NOUN
fuelectenerg-900	417	13	ratio	ratio	NOUN
fuelectenerg-900	417	14	.	.	PUNCT
fuelectenerg-900	418	1	these	these	DET
fuelectenerg-900	418	2	characteristics	characteristic	NOUN
fuelectenerg-900	418	3	imply	imply	VERB
fuelectenerg-900	418	4	that	that	SCONJ
fuelectenerg-900	418	5	the	the	DET
fuelectenerg-900	418	6	conclusions	conclusion	NOUN
fuelectenerg-900	418	7	1	1	NUM
fuelectenerg-900	418	8	-	-	SYM
fuelectenerg-900	418	9	3	3	NUM
fuelectenerg-900	418	10	made	make	VERB
fuelectenerg-900	418	11	at	at	ADP
fuelectenerg-900	418	12	the	the	DET
fuelectenerg-900	418	13	end	end	NOUN
fuelectenerg-900	418	14	of	of	ADP
fuelectenerg-900	418	15	section	section	NOUN
fuelectenerg-900	418	16	2.2	2.2	NUM
fuelectenerg-900	418	17	are	be	AUX
fuelectenerg-900	418	18	in	in	ADP
fuelectenerg-900	418	19	favor	favor	NOUN
fuelectenerg-900	418	20	of	of	ADP
fuelectenerg-900	418	21	graphene	graphene	NOUN
fuelectenerg-900	418	22	-	-	PUNCT
fuelectenerg-900	418	23	based	base	VERB
fuelectenerg-900	418	24	resonators	resonator	NOUN
fuelectenerg-900	418	25	as	as	SCONJ
fuelectenerg-900	418	26	opposed	oppose	VERB
fuelectenerg-900	418	27	to	to	ADP
fuelectenerg-900	418	28	mems	mem	NOUN
fuelectenerg-900	418	29	and	and	CCONJ
fuelectenerg-900	418	30	nems	nem	NOUN
fuelectenerg-900	418	31	resonators	resonator	NOUN
fuelectenerg-900	418	32	made	make	VERB
fuelectenerg-900	418	33	of	of	ADP
fuelectenerg-900	418	34	traditional	traditional	ADJ
fuelectenerg-900	418	35	materials	material	NOUN
fuelectenerg-900	418	36	:	:	PUNCT
fuelectenerg-900	418	37	graphene	graphene	NOUN
fuelectenerg-900	418	38	structures	structure	NOUN
fuelectenerg-900	418	39	can	can	AUX
fuelectenerg-900	418	40	have	have	VERB
fuelectenerg-900	418	41	high	high	ADJ
fuelectenerg-900	418	42	resonance	resonance	NOUN
fuelectenerg-900	418	43	frequencies	frequency	NOUN
fuelectenerg-900	418	44	which	which	PRON
fuelectenerg-900	418	45	can	can	AUX
fuelectenerg-900	418	46	be	be	AUX
fuelectenerg-900	418	47	further	far	ADV
fuelectenerg-900	418	48	increased	increase	VERB
fuelectenerg-900	418	49	and	and	CCONJ
fuelectenerg-900	418	50	widely	widely	ADV
fuelectenerg-900	418	51	tuned	tune	VERB
fuelectenerg-900	418	52	by	by	ADP
fuelectenerg-900	418	53	application	application	NOUN
fuelectenerg-900	418	54	of	of	ADP
fuelectenerg-900	418	55	large	large	ADJ
fuelectenerg-900	418	56	strains	strain	NOUN
fuelectenerg-900	418	57	.	.	PUNCT
fuelectenerg-900	419	1	for	for	ADP
fuelectenerg-900	419	2	example	example	NOUN
fuelectenerg-900	419	3	,	,	PUNCT
fuelectenerg-900	419	4	for	for	ADP
fuelectenerg-900	419	5	a	a	DET
fuelectenerg-900	419	6	graphene	graphene	ADJ
fuelectenerg-900	419	7	beam	beam	NOUN
fuelectenerg-900	419	8	of	of	ADP
fuelectenerg-900	419	9	1	1	NUM
fuelectenerg-900	419	10	m	m	PROPN
fuelectenerg-900	419	11	in	in	ADP
fuelectenerg-900	419	12	length	length	NOUN
fuelectenerg-900	419	13	,	,	PUNCT
fuelectenerg-900	419	14	and	and	CCONJ
fuelectenerg-900	419	15	exposed	expose	VERB
fuelectenerg-900	419	16	to	to	ADP
fuelectenerg-900	419	17	1	1	NUM
fuelectenerg-900	419	18	%	%	NOUN
fuelectenerg-900	419	19	of	of	ADP
fuelectenerg-900	419	20	strain	strain	NOUN
fuelectenerg-900	419	21	,	,	PUNCT
fuelectenerg-900	419	22	the	the	DET
fuelectenerg-900	419	23	parameter	parameter	NOUN
fuelectenerg-900	419	24	p	p	X
fuelectenerg-900	419	25	(	(	PUNCT
fuelectenerg-900	419	26	eq	eq	NOUN
fuelectenerg-900	419	27	.	.	PROPN
fuelectenerg-900	419	28	(	(	PUNCT
fuelectenerg-900	419	29	2	2	NUM
fuelectenerg-900	419	30	)	)	PUNCT
fuelectenerg-900	419	31	)	)	PUNCT
fuelectenerg-900	419	32	is	be	AUX
fuelectenerg-900	419	33	about	about	ADV
fuelectenerg-900	419	34	10	10	NUM
fuelectenerg-900	419	35	6	6	NUM
fuelectenerg-900	419	36	,	,	PUNCT
fuelectenerg-900	419	37	which	which	PRON
fuelectenerg-900	419	38	,	,	PUNCT
fuelectenerg-900	419	39	according	accord	VERB
fuelectenerg-900	419	40	to	to	ADP
fuelectenerg-900	419	41	the	the	DET
fuelectenerg-900	419	42	diagram	diagram	NOUN
fuelectenerg-900	419	43	in	in	ADP
fuelectenerg-900	419	44	fig	fig	NOUN
fuelectenerg-900	419	45	.	.	PUNCT
fuelectenerg-900	420	1	4b	4b	PROPN
fuelectenerg-900	420	2	yields	yield	VERB
fuelectenerg-900	420	3	the	the	DET
fuelectenerg-900	420	4	ratio	ratio	NOUN
fuelectenerg-900	420	5	of	of	ADP
fuelectenerg-900	420	6	the	the	DET
fuelectenerg-900	420	7	resonance	resonance	NOUN
fuelectenerg-900	420	8	frequencies	frequency	NOUN
fuelectenerg-900	420	9	of	of	ADP
fuelectenerg-900	420	10	stretched	stretch	VERB
fuelectenerg-900	420	11	and	and	CCONJ
fuelectenerg-900	420	12	unstretched	unstretched	ADJ
fuelectenerg-900	420	13	beam	beam	NOUN
fuelectenerg-900	420	14	as	as	ADV
fuelectenerg-900	420	15	high	high	ADJ
fuelectenerg-900	420	16	as	as	ADP
fuelectenerg-900	420	17	10	10	NUM
fuelectenerg-900	420	18	2	2	NUM
fuelectenerg-900	420	19	(	(	PUNCT
fuelectenerg-900	420	20	in	in	ADP
fuelectenerg-900	420	21	typical	typical	ADJ
fuelectenerg-900	420	22	mems	mem	NOUN
fuelectenerg-900	420	23	resonators	resonator	NOUN
fuelectenerg-900	420	24	the	the	DET
fuelectenerg-900	420	25	ratio	ratio	NOUN
fuelectenerg-900	420	26	is	be	AUX
fuelectenerg-900	420	27	3.3	3.3	NUM
fuelectenerg-900	420	28	,	,	PUNCT
fuelectenerg-900	420	29	as	as	SCONJ
fuelectenerg-900	420	30	stated	state	VERB
fuelectenerg-900	420	31	earlier	early	ADV
fuelectenerg-900	420	32	)	)	PUNCT
fuelectenerg-900	420	33	.	.	PUNCT
fuelectenerg-900	421	1	apart	apart	ADV
fuelectenerg-900	421	2	from	from	ADP
fuelectenerg-900	421	3	that	that	PRON
fuelectenerg-900	421	4	,	,	PUNCT
fuelectenerg-900	421	5	graphene	graphene	VERB
fuelectenerg-900	421	6	's	's	PART
fuelectenerg-900	421	7	charge	charge	NOUN
fuelectenerg-900	421	8	-	-	PUNCT
fuelectenerg-900	421	9	tunable	tunable	NOUN
fuelectenerg-900	421	10	conductance	conductance	NOUN
fuelectenerg-900	421	11	and	and	CCONJ
fuelectenerg-900	421	12	large	large	ADJ
fuelectenerg-900	421	13	charge	charge	NOUN
fuelectenerg-900	421	14	mobility	mobility	NOUN
fuelectenerg-900	421	15	allow	allow	VERB
fuelectenerg-900	421	16	the	the	DET
fuelectenerg-900	421	17	efficient	efficient	ADJ
fuelectenerg-900	421	18	electrical	electrical	ADJ
fuelectenerg-900	421	19	transduction	transduction	NOUN
fuelectenerg-900	421	20	of	of	ADP
fuelectenerg-900	421	21	mechanical	mechanical	ADJ
fuelectenerg-900	421	22	vibration	vibration	NOUN
fuelectenerg-900	421	23	to	to	ADP
fuelectenerg-900	421	24	electrical	electrical	ADJ
fuelectenerg-900	421	25	signal	signal	NOUN
fuelectenerg-900	421	26	.	.	PUNCT
fuelectenerg-900	422	1	thus	thus	ADV
fuelectenerg-900	422	2	,	,	PUNCT
fuelectenerg-900	422	3	there	there	PRON
fuelectenerg-900	422	4	is	be	VERB
fuelectenerg-900	422	5	a	a	DET
fuelectenerg-900	422	6	growing	grow	VERB
fuelectenerg-900	422	7	interest	interest	NOUN
fuelectenerg-900	422	8	in	in	ADP
fuelectenerg-900	422	9	the	the	DET
fuelectenerg-900	422	10	development	development	NOUN
fuelectenerg-900	422	11	of	of	ADP
fuelectenerg-900	422	12	graphene	graphene	NOUN
fuelectenerg-900	422	13	-	-	PUNCT
fuelectenerg-900	422	14	based	base	VERB
fuelectenerg-900	422	15	nems	nem	NOUN
fuelectenerg-900	422	16	resonators	resonator	NOUN
fuelectenerg-900	422	17	.	.	PUNCT
fuelectenerg-900	423	1	in	in	ADP
fuelectenerg-900	423	2	fig	fig	NOUN
fuelectenerg-900	423	3	.	.	PUNCT
fuelectenerg-900	424	1	6a	6a	NOUN
fuelectenerg-900	424	2	a	a	DET
fuelectenerg-900	424	3	schematic	schematic	ADJ
fuelectenerg-900	424	4	diagram	diagram	NOUN
fuelectenerg-900	424	5	is	be	AUX
fuelectenerg-900	424	6	given	give	VERB
fuelectenerg-900	424	7	of	of	ADP
fuelectenerg-900	424	8	a	a	DET
fuelectenerg-900	424	9	graphene	graphene	NOUN
fuelectenerg-900	424	10	doubly	doubly	ADV
fuelectenerg-900	424	11	-	-	PUNCT
fuelectenerg-900	424	12	clamped	clamp	VERB
fuelectenerg-900	424	13	beam	beam	NOUN
fuelectenerg-900	424	14	exposed	expose	VERB
fuelectenerg-900	424	15	to	to	ADP
fuelectenerg-900	424	16	tensile	tensile	NOUN
fuelectenerg-900	424	17	strain	strain	NOUN
fuelectenerg-900	424	18	.	.	PUNCT
fuelectenerg-900	425	1	fig	fig	NOUN
fuelectenerg-900	425	2	.	.	PUNCT
fuelectenerg-900	426	1	6b	6b	PROPN
fuelectenerg-900	426	2	shows	show	VERB
fuelectenerg-900	426	3	the	the	DET
fuelectenerg-900	426	4	strain	strain	ADJ
fuelectenerg-900	426	5	dependence	dependence	NOUN
fuelectenerg-900	426	6	of	of	ADP
fuelectenerg-900	426	7	the	the	DET
fuelectenerg-900	426	8	first	first	ADJ
fuelectenerg-900	426	9	mode	mode	NOUN
fuelectenerg-900	426	10	resonance	resonance	NOUN
fuelectenerg-900	426	11	frequencies	frequency	NOUN
fuelectenerg-900	426	12	of	of	ADP
fuelectenerg-900	426	13	1	1	NUM
fuelectenerg-900	426	14	m	m	PROPN
fuelectenerg-900	426	15	and	and	CCONJ
fuelectenerg-900	426	16	2	2	NUM
fuelectenerg-900	426	17	m	m	NOUN
fuelectenerg-900	426	18	long	long	ADV
fuelectenerg-900	426	19	doubly	doubly	ADV
fuelectenerg-900	426	20	-	-	PUNCT
fuelectenerg-900	426	21	clamped	clamp	VERB
fuelectenerg-900	426	22	graphene	graphene	NOUN
fuelectenerg-900	426	23	beams	beam	NOUN
fuelectenerg-900	426	24	(	(	PUNCT
fuelectenerg-900	426	25	obtained	obtain	VERB
fuelectenerg-900	426	26	by	by	ADP
fuelectenerg-900	426	27	using	use	VERB
fuelectenerg-900	426	28	eqs	eqs	PROPN
fuelectenerg-900	426	29	.	.	PUNCT
fuelectenerg-900	427	1	(	(	PUNCT
fuelectenerg-900	427	2	1)-(3	1)-(3	NUM
fuelectenerg-900	427	3	)	)	PUNCT
fuelectenerg-900	427	4	)	)	PUNCT
fuelectenerg-900	427	5	.	.	PUNCT
fuelectenerg-900	428	1	it	it	PRON
fuelectenerg-900	428	2	indicates	indicate	VERB
fuelectenerg-900	428	3	that	that	SCONJ
fuelectenerg-900	428	4	the	the	DET
fuelectenerg-900	428	5	resonance	resonance	NOUN
fuelectenerg-900	428	6	frequency	frequency	NOUN
fuelectenerg-900	428	7	can	can	AUX
fuelectenerg-900	428	8	be	be	AUX
fuelectenerg-900	428	9	increased	increase	VERB
fuelectenerg-900	428	10	by	by	ADP
fuelectenerg-900	428	11	several	several	ADJ
fuelectenerg-900	428	12	orders	order	NOUN
fuelectenerg-900	428	13	of	of	ADP
fuelectenerg-900	428	14	magnitude	magnitude	NOUN
fuelectenerg-900	428	15	when	when	SCONJ
fuelectenerg-900	428	16	stretching	stretching	NOUN
fuelectenerg-900	428	17	is	be	AUX
fuelectenerg-900	428	18	applied	apply	VERB
fuelectenerg-900	428	19	,	,	PUNCT
fuelectenerg-900	428	20	compared	compare	VERB
fuelectenerg-900	428	21	to	to	ADP
fuelectenerg-900	428	22	the	the	DET
fuelectenerg-900	428	23	resonance	resonance	NOUN
fuelectenerg-900	428	24	frequency	frequency	NOUN
fuelectenerg-900	428	25	of	of	ADP
fuelectenerg-900	428	26	the	the	DET
fuelectenerg-900	428	27	unstretched	unstretched	ADJ
fuelectenerg-900	428	28	beam	beam	NOUN
fuelectenerg-900	428	29	,	,	PUNCT
fuelectenerg-900	428	30	which	which	PRON
fuelectenerg-900	428	31	is	be	AUX
fuelectenerg-900	428	32	a	a	DET
fuelectenerg-900	428	33	consequence	consequence	NOUN
fuelectenerg-900	428	34	of	of	ADP
fuelectenerg-900	428	35	a	a	DET
fuelectenerg-900	428	36	high	high	ADJ
fuelectenerg-900	428	37	l	l	NOUN
fuelectenerg-900	428	38	/	/	SYM
fuelectenerg-900	428	39	h	h	NOUN
fuelectenerg-900	428	40	ratio	ratio	NOUN
fuelectenerg-900	428	41	(	(	PUNCT
fuelectenerg-900	428	42	l	l	NOUN
fuelectenerg-900	428	43	/	/	SYM
fuelectenerg-900	428	44	h	h	NOUN
fuelectenerg-900	428	45	is	be	AUX
fuelectenerg-900	428	46	about	about	ADV
fuelectenerg-900	428	47	3000	3000	NUM
fuelectenerg-900	428	48	for	for	ADP
fuelectenerg-900	428	49	a	a	DET
fuelectenerg-900	428	50	1	1	NUM
fuelectenerg-900	428	51	m	m	PROPN
fuelectenerg-900	428	52	long	long	ADJ
fuelectenerg-900	428	53	graphene	graphene	NOUN
fuelectenerg-900	428	54	beam	beam	NOUN
fuelectenerg-900	428	55	)	)	PUNCT
fuelectenerg-900	428	56	.	.	PUNCT
fuelectenerg-900	429	1	because	because	SCONJ
fuelectenerg-900	429	2	of	of	ADP
fuelectenerg-900	429	3	that	that	PRON
fuelectenerg-900	429	4	,	,	PUNCT
fuelectenerg-900	429	5	ghz	ghz	NOUN
fuelectenerg-900	429	6	frequencies	frequency	NOUN
fuelectenerg-900	429	7	can	can	AUX
fuelectenerg-900	429	8	be	be	AUX
fuelectenerg-900	429	9	attained	attain	VERB
fuelectenerg-900	429	10	even	even	ADV
fuelectenerg-900	429	11	when	when	SCONJ
fuelectenerg-900	429	12	resonance	resonance	NOUN
fuelectenerg-900	429	13	frequencies	frequency	NOUN
fuelectenerg-900	429	14	of	of	ADP
fuelectenerg-900	429	15	unstretched	unstretched	ADJ
fuelectenerg-900	429	16	beams	beam	NOUN
fuelectenerg-900	429	17	are	be	AUX
fuelectenerg-900	429	18	in	in	ADP
fuelectenerg-900	429	19	the	the	DET
fuelectenerg-900	429	20	mhz	mhz	NOUN
fuelectenerg-900	429	21	-	-	PUNCT
fuelectenerg-900	429	22	range	range	NOUN
fuelectenerg-900	429	23	(	(	PUNCT
fuelectenerg-900	429	24	typical	typical	ADJ
fuelectenerg-900	429	25	for	for	ADP
fuelectenerg-900	429	26	2d	2d	NUM
fuelectenerg-900	429	27	resonators	resonator	NOUN
fuelectenerg-900	429	28	1	1	NUM
fuelectenerg-900	429	29	-	-	SYM
fuelectenerg-900	429	30	5	5	NUM
fuelectenerg-900	429	31	m	m	NOUN
fuelectenerg-900	429	32	long	long	ADJ
fuelectenerg-900	429	33	)	)	PUNCT
fuelectenerg-900	429	34	.	.	PUNCT
fuelectenerg-900	430	1	as	as	SCONJ
fuelectenerg-900	430	2	it	it	PRON
fuelectenerg-900	430	3	can	can	AUX
fuelectenerg-900	430	4	be	be	AUX
fuelectenerg-900	430	5	seen	see	VERB
fuelectenerg-900	430	6	by	by	ADP
fuelectenerg-900	430	7	comparison	comparison	NOUN
fuelectenerg-900	430	8	of	of	ADP
fuelectenerg-900	430	9	figs	fig	NOUN
fuelectenerg-900	430	10	.	.	PUNCT
fuelectenerg-900	431	1	5a	5a	NUM
fuelectenerg-900	431	2	and	and	CCONJ
fuelectenerg-900	431	3	6b	6b	NOUN
fuelectenerg-900	431	4	,	,	PUNCT
fuelectenerg-900	431	5	in	in	ADP
fuelectenerg-900	431	6	atomically	atomically	ADV
fuelectenerg-900	431	7	thin	thin	ADJ
fuelectenerg-900	431	8	structures	structure	NOUN
fuelectenerg-900	431	9	the	the	DET
fuelectenerg-900	431	10	values	value	NOUN
fuelectenerg-900	431	11	of	of	ADP
fuelectenerg-900	431	12	ε	ε	PROPN
fuelectenerg-900	431	13	above	above	ADP
fuelectenerg-900	431	14	which	which	PRON
fuelectenerg-900	431	15	the	the	DET
fuelectenerg-900	431	16	tension	tension	NOUN
fuelectenerg-900	431	17	dominated	dominate	VERB
fuelectenerg-900	431	18	resonance	resonance	NOUN
fuelectenerg-900	431	19	frequency	frequency	NOUN
fuelectenerg-900	431	20	region	region	NOUN
fuelectenerg-900	431	21	begins	begin	VERB
fuelectenerg-900	431	22	are	be	AUX
fuelectenerg-900	431	23	significantly	significantly	ADV
fuelectenerg-900	431	24	lower	low	ADJ
fuelectenerg-900	431	25	than	than	ADP
fuelectenerg-900	431	26	in	in	ADP
fuelectenerg-900	431	27	mems	mem	NOUN
fuelectenerg-900	431	28	/	/	SYM
fuelectenerg-900	431	29	nems	nem	NOUN
fuelectenerg-900	431	30	resonators	resonator	NOUN
fuelectenerg-900	431	31	of	of	ADP
fuelectenerg-900	431	32	a	a	DET
fuelectenerg-900	431	33	lower	low	ADJ
fuelectenerg-900	431	34	l	l	NOUN
fuelectenerg-900	431	35	/	/	SYM
fuelectenerg-900	431	36	h	h	NOUN
fuelectenerg-900	431	37	ratio	ratio	NOUN
fuelectenerg-900	431	38	.	.	PUNCT
fuelectenerg-900	432	1	in	in	ADP
fuelectenerg-900	432	2	the	the	DET
fuelectenerg-900	432	3	following	follow	VERB
fuelectenerg-900	432	4	text	text	NOUN
fuelectenerg-900	432	5	a	a	DET
fuelectenerg-900	432	6	short	short	ADJ
fuelectenerg-900	432	7	description	description	NOUN
fuelectenerg-900	432	8	will	will	AUX
fuelectenerg-900	432	9	be	be	AUX
fuelectenerg-900	432	10	given	give	VERB
fuelectenerg-900	432	11	of	of	ADP
fuelectenerg-900	432	12	two	two	NUM
fuelectenerg-900	432	13	types	type	NOUN
fuelectenerg-900	432	14	of	of	ADP
fuelectenerg-900	432	15	carbon	carbon	NOUN
fuelectenerg-900	432	16	(	(	PUNCT
fuelectenerg-900	432	17	graphene	graphene	NOUN
fuelectenerg-900	432	18	)	)	PUNCT
fuelectenerg-900	432	19	based	base	VERB
fuelectenerg-900	432	20	resonators	resonator	NOUN
fuelectenerg-900	432	21	:	:	PUNCT
fuelectenerg-900	432	22	carbon	carbon	NOUN
fuelectenerg-900	432	23	nanotube	nanotube	NOUN
fuelectenerg-900	432	24	resonators	resonator	NOUN
fuelectenerg-900	432	25	and	and	CCONJ
fuelectenerg-900	432	26	graphene	graphene	VERB
fuelectenerg-900	432	27	(	(	PUNCT
fuelectenerg-900	432	28	beam	beam	NOUN
fuelectenerg-900	432	29	and	and	CCONJ
fuelectenerg-900	432	30	membrane	membrane	NOUN
fuelectenerg-900	432	31	)	)	PUNCT
fuelectenerg-900	432	32	resonators	resonator	NOUN
fuelectenerg-900	432	33	.	.	PUNCT
fuelectenerg-900	433	1	a	a	DET
fuelectenerg-900	433	2	carbon	carbon	NOUN
fuelectenerg-900	433	3	nanotube	nanotube	NOUN
fuelectenerg-900	433	4	(	(	PUNCT
fuelectenerg-900	433	5	cnt	cnt	PROPN
fuelectenerg-900	433	6	)	)	PUNCT
fuelectenerg-900	433	7	is	be	AUX
fuelectenerg-900	433	8	a	a	DET
fuelectenerg-900	433	9	hollow	hollow	ADJ
fuelectenerg-900	433	10	cylinder	cylinder	NOUN
fuelectenerg-900	433	11	of	of	ADP
fuelectenerg-900	433	12	covalently	covalently	ADV
fuelectenerg-900	433	13	bonded	bond	VERB
fuelectenerg-900	433	14	carbon	carbon	NOUN
fuelectenerg-900	433	15	atoms	atom	NOUN
fuelectenerg-900	433	16	.	.	PUNCT
fuelectenerg-900	434	1	depending	depend	VERB
fuelectenerg-900	434	2	on	on	ADP
fuelectenerg-900	434	3	the	the	DET
fuelectenerg-900	434	4	number	number	NOUN
fuelectenerg-900	434	5	of	of	ADP
fuelectenerg-900	434	6	graphene	graphene	NOUN
fuelectenerg-900	434	7	sheets	sheet	NOUN
fuelectenerg-900	434	8	that	that	PRON
fuelectenerg-900	434	9	are	be	AUX
fuelectenerg-900	434	10	rolled	roll	VERB
fuelectenerg-900	434	11	concentrically	concentrically	ADV
fuelectenerg-900	434	12	,	,	PUNCT
fuelectenerg-900	434	13	such	such	DET
fuelectenerg-900	434	14	a	a	DET
fuelectenerg-900	434	15	structure	structure	NOUN
fuelectenerg-900	434	16	can	can	AUX
fuelectenerg-900	434	17	be	be	AUX
fuelectenerg-900	434	18	a	a	DET
fuelectenerg-900	434	19	single	single	ADJ
fuelectenerg-900	434	20	-	-	PUNCT
fuelectenerg-900	434	21	walled	wall	VERB
fuelectenerg-900	434	22	carbon	carbon	NOUN
fuelectenerg-900	434	23	nanotube	nanotube	NOUN
fuelectenerg-900	434	24	(	(	PUNCT
fuelectenerg-900	434	25	swnt	swnt	NOUN
fuelectenerg-900	434	26	)	)	PUNCT
fuelectenerg-900	434	27	or	or	CCONJ
fuelectenerg-900	434	28	a	a	DET
fuelectenerg-900	434	29	multi	multi	ADJ
fuelectenerg-900	434	30	-	-	ADJ
fuelectenerg-900	434	31	walled	walled	ADJ
fuelectenerg-900	434	32	carbon	carbon	NOUN
fuelectenerg-900	434	33	nanotube	nanotube	NOUN
fuelectenerg-900	434	34	(	(	PUNCT
fuelectenerg-900	434	35	mwnt	mwnt	NOUN
fuelectenerg-900	434	36	)	)	PUNCT
fuelectenerg-900	434	37	.	.	PUNCT
fuelectenerg-900	435	1	the	the	DET
fuelectenerg-900	435	2	first	first	ADJ
fuelectenerg-900	435	3	successfully	successfully	ADV
fuelectenerg-900	435	4	fabricated	fabricate	VERB
fuelectenerg-900	435	5	nanotubes	nanotube	NOUN
fuelectenerg-900	435	6	were	be	AUX
fuelectenerg-900	435	7	reported	report	VERB
fuelectenerg-900	435	8	in	in	ADP
fuelectenerg-900	435	9	1991	1991	NUM
fuelectenerg-900	435	10	[	[	X
fuelectenerg-900	435	11	88	88	NUM
fuelectenerg-900	435	12	]	]	PUNCT
fuelectenerg-900	435	13	.	.	PUNCT
fuelectenerg-900	436	1	typically	typically	ADV
fuelectenerg-900	436	2	,	,	PUNCT
fuelectenerg-900	436	3	the	the	DET
fuelectenerg-900	436	4	diameter	diameter	NOUN
fuelectenerg-900	436	5	of	of	ADP
fuelectenerg-900	436	6	a	a	DET
fuelectenerg-900	436	7	swnt	swnt	NOUN
fuelectenerg-900	436	8	is	be	AUX
fuelectenerg-900	436	9	1	1	NUM
fuelectenerg-900	436	10	-	-	SYM
fuelectenerg-900	436	11	2	2	NUM
fuelectenerg-900	436	12	nm	nm	NOUN
fuelectenerg-900	436	13	,	,	PUNCT
fuelectenerg-900	436	14	and	and	CCONJ
fuelectenerg-900	436	15	the	the	DET
fuelectenerg-900	436	16	length	length	NOUN
fuelectenerg-900	436	17	is	be	AUX
fuelectenerg-900	436	18	several	several	ADJ
fuelectenerg-900	436	19	micrometers	micrometer	NOUN
fuelectenerg-900	436	20	(	(	PUNCT
fuelectenerg-900	436	21	several	several	ADJ
fuelectenerg-900	436	22	millimeters	millimeter	NOUN
fuelectenerg-900	436	23	long	long	ADJ
fuelectenerg-900	436	24	swnts	swnt	NOUN
fuelectenerg-900	436	25	have	have	AUX
fuelectenerg-900	436	26	also	also	ADV
fuelectenerg-900	436	27	been	be	AUX
fuelectenerg-900	436	28	reported	report	VERB
fuelectenerg-900	436	29	[	[	X
fuelectenerg-900	436	30	89	89	NUM
fuelectenerg-900	436	31	]	]	NUM
fuelectenerg-900	436	32	)	)	PUNCT
fuelectenerg-900	436	33	.	.	PUNCT
fuelectenerg-900	437	1	the	the	DET
fuelectenerg-900	437	2	diameter	diameter	NOUN
fuelectenerg-900	437	3	of	of	ADP
fuelectenerg-900	437	4	mwnt	mwnt	NOUN
fuelectenerg-900	437	5	is	be	AUX
fuelectenerg-900	437	6	usually	usually	ADV
fuelectenerg-900	437	7	2	2	NUM
fuelectenerg-900	437	8	-	-	SYM
fuelectenerg-900	437	9	25	25	NUM
fuelectenerg-900	437	10	nm	nm	NOUN
fuelectenerg-900	437	11	,	,	PUNCT
fuelectenerg-900	437	12	and	and	CCONJ
fuelectenerg-900	437	13	its	its	PRON
fuelectenerg-900	437	14	length	length	NOUN
fuelectenerg-900	437	15	is	be	AUX
fuelectenerg-900	437	16	several	several	ADJ
fuelectenerg-900	437	17	tens	ten	NOUN
fuelectenerg-900	437	18	of	of	ADP
fuelectenerg-900	437	19	micrometers	micrometer	NOUN
fuelectenerg-900	437	20	(	(	PUNCT
fuelectenerg-900	437	21	they	they	PRON
fuelectenerg-900	437	22	can	can	AUX
fuelectenerg-900	437	23	be	be	AUX
fuelectenerg-900	437	24	grown	grow	VERB
fuelectenerg-900	437	25	up	up	ADP
fuelectenerg-900	437	26	to	to	ADP
fuelectenerg-900	437	27	several	several	ADJ
fuelectenerg-900	437	28	centimeters	centimeter	NOUN
fuelectenerg-900	437	29	in	in	ADP
fuelectenerg-900	437	30	length	length	NOUN
fuelectenerg-900	437	31	[	[	X
fuelectenerg-900	437	32	90	90	NUM
fuelectenerg-900	437	33	]	]	NUM
fuelectenerg-900	437	34	)	)	PUNCT
fuelectenerg-900	437	35	.	.	PUNCT
fuelectenerg-900	438	1	currently	currently	ADV
fuelectenerg-900	438	2	,	,	PUNCT
fuelectenerg-900	438	3	these	these	DET
fuelectenerg-900	438	4	bottom	bottom	ADJ
fuelectenerg-900	438	5	-	-	PUNCT
fuelectenerg-900	438	6	up	up	ADP
fuelectenerg-900	438	7	structures	structure	NOUN
fuelectenerg-900	438	8	are	be	AUX
fuelectenerg-900	438	9	typically	typically	ADV
fuelectenerg-900	438	10	synthesized	synthesize	VERB
fuelectenerg-900	438	11	by	by	ADP
fuelectenerg-900	438	12	chemical	chemical	ADJ
fuelectenerg-900	438	13	vapor	vapor	NOUN
fuelectenerg-900	438	14	deposition	deposition	NOUN
fuelectenerg-900	438	15	(	(	PUNCT
fuelectenerg-900	438	16	cvd	cvd	PROPN
fuelectenerg-900	438	17	)	)	PUNCT
fuelectenerg-900	438	18	,	,	PUNCT
fuelectenerg-900	438	19	using	use	VERB
fuelectenerg-900	438	20	the	the	DET
fuelectenerg-900	438	21	catalyst	catalyst	NOUN
fuelectenerg-900	438	22	-	-	PUNCT
fuelectenerg-900	438	23	assisted	assist	VERB
fuelectenerg-900	438	24	method	method	NOUN
fuelectenerg-900	438	25	which	which	PRON
fuelectenerg-900	438	26	enables	enable	VERB
fuelectenerg-900	438	27	obtaining	obtain	VERB
fuelectenerg-900	438	28	of	of	ADP
fuelectenerg-900	438	29	nanotubes	nanotube	NOUN
fuelectenerg-900	438	30	that	that	PRON
fuelectenerg-900	438	31	are	be	AUX
fuelectenerg-900	438	32	defect	defect	NOUN
fuelectenerg-900	438	33	-	-	PUNCT
fuelectenerg-900	438	34	free	free	ADJ
fuelectenerg-900	438	35	or	or	CCONJ
fuelectenerg-900	438	36	with	with	ADP
fuelectenerg-900	438	37	a	a	DET
fuelectenerg-900	438	38	few	few	ADJ
fuelectenerg-900	438	39	defects	defect	NOUN
fuelectenerg-900	438	40	only	only	ADV
fuelectenerg-900	438	41	.	.	PUNCT
fuelectenerg-900	439	1	366	366	NUM
fuelectenerg-900	439	2	i.	i.	NOUN
fuelectenerg-900	439	3	jokić	jokić	PROPN
fuelectenerg-900	439	4	,	,	PUNCT
fuelectenerg-900	439	5	m.	m.	NOUN
fuelectenerg-900	439	6	frantlović	frantlović	NOUN
fuelectenerg-900	439	7	,	,	PUNCT
fuelectenerg-900	439	8	z.	z.	PROPN
fuelectenerg-900	439	9	djurić	djurić	PROPN
fuelectenerg-900	439	10	,	,	PUNCT
fuelectenerg-900	439	11	m.	m.	NOUN
fuelectenerg-900	439	12	l.	l.	PROPN
fuelectenerg-900	439	13	dukić	dukić	PROPN
fuelectenerg-900	439	14	fig	fig	PROPN
fuelectenerg-900	439	15	.	.	PUNCT
fuelectenerg-900	440	1	6	6	NUM
fuelectenerg-900	440	2	a	a	X
fuelectenerg-900	440	3	)	)	PUNCT
fuelectenerg-900	440	4	schematic	schematic	ADJ
fuelectenerg-900	440	5	representation	representation	NOUN
fuelectenerg-900	440	6	of	of	ADP
fuelectenerg-900	440	7	a	a	DET
fuelectenerg-900	440	8	2d	2d	NOUN
fuelectenerg-900	440	9	(	(	PUNCT
fuelectenerg-900	440	10	graphene	graphene	NOUN
fuelectenerg-900	440	11	)	)	PUNCT
fuelectenerg-900	440	12	beam	beam	NOUN
fuelectenerg-900	440	13	resonator	resonator	NOUN
fuelectenerg-900	440	14	under	under	ADP
fuelectenerg-900	440	15	tension	tension	NOUN
fuelectenerg-900	440	16	,	,	PUNCT
fuelectenerg-900	440	17	b	b	X
fuelectenerg-900	440	18	)	)	PUNCT
fuelectenerg-900	440	19	the	the	DET
fuelectenerg-900	440	20	strain	strain	ADJ
fuelectenerg-900	440	21	dependence	dependence	NOUN
fuelectenerg-900	440	22	of	of	ADP
fuelectenerg-900	440	23	the	the	DET
fuelectenerg-900	440	24	first	first	ADJ
fuelectenerg-900	440	25	mode	mode	NOUN
fuelectenerg-900	440	26	resonance	resonance	NOUN
fuelectenerg-900	440	27	frequencies	frequency	NOUN
fuelectenerg-900	440	28	of	of	ADP
fuelectenerg-900	440	29	1	1	NUM
fuelectenerg-900	440	30	m	m	PROPN
fuelectenerg-900	440	31	and	and	CCONJ
fuelectenerg-900	440	32	2	2	NUM
fuelectenerg-900	440	33	m	m	NOUN
fuelectenerg-900	440	34	long	long	ADV
fuelectenerg-900	440	35	doubly	doubly	ADV
fuelectenerg-900	440	36	-	-	PUNCT
fuelectenerg-900	440	37	clamped	clamp	VERB
fuelectenerg-900	440	38	graphene	graphene	NOUN
fuelectenerg-900	440	39	beams	beam	NOUN
fuelectenerg-900	440	40	.	.	PUNCT
fuelectenerg-900	441	1	the	the	DET
fuelectenerg-900	441	2	first	first	ADJ
fuelectenerg-900	441	3	nanotube	nanotube	ADJ
fuelectenerg-900	441	4	resonator	resonator	NOUN
fuelectenerg-900	441	5	was	be	AUX
fuelectenerg-900	441	6	made	make	VERB
fuelectenerg-900	441	7	out	out	ADP
fuelectenerg-900	441	8	of	of	ADP
fuelectenerg-900	441	9	mwnt	mwnt	NOUN
fuelectenerg-900	441	10	in	in	ADP
fuelectenerg-900	441	11	1999	1999	NUM
fuelectenerg-900	441	12	[	[	X
fuelectenerg-900	441	13	91	91	NUM
fuelectenerg-900	441	14	]	]	PUNCT
fuelectenerg-900	441	15	.	.	PUNCT
fuelectenerg-900	442	1	tunable	tunable	NOUN
fuelectenerg-900	442	2	swnt	swnt	NOUN
fuelectenerg-900	442	3	and	and	CCONJ
fuelectenerg-900	442	4	mwnt	mwnt	NOUN
fuelectenerg-900	442	5	resonators	resonator	NOUN
fuelectenerg-900	442	6	have	have	AUX
fuelectenerg-900	442	7	been	be	AUX
fuelectenerg-900	442	8	reported	report	VERB
fuelectenerg-900	442	9	in	in	ADP
fuelectenerg-900	442	10	2004	2004	NUM
fuelectenerg-900	442	11	[	[	X
fuelectenerg-900	442	12	92	92	NUM
fuelectenerg-900	442	13	]	]	PUNCT
fuelectenerg-900	442	14	.	.	PUNCT
fuelectenerg-900	443	1	method	method	NOUN
fuelectenerg-900	443	2	of	of	ADP
fuelectenerg-900	443	3	actuation	actuation	NOUN
fuelectenerg-900	443	4	and	and	CCONJ
fuelectenerg-900	443	5	detection	detection	NOUN
fuelectenerg-900	443	6	of	of	ADP
fuelectenerg-900	443	7	a	a	DET
fuelectenerg-900	443	8	nanotube	nanotube	ADJ
fuelectenerg-900	443	9	resonator	resonator	NOUN
fuelectenerg-900	443	10	motion	motion	NOUN
fuelectenerg-900	443	11	,	,	PUNCT
fuelectenerg-900	443	12	suitable	suitable	ADJ
fuelectenerg-900	443	13	for	for	ADP
fuelectenerg-900	443	14	realization	realization	NOUN
fuelectenerg-900	443	15	on	on	ADP
fuelectenerg-900	443	16	a	a	DET
fuelectenerg-900	443	17	single	single	ADJ
fuelectenerg-900	443	18	chip	chip	NOUN
fuelectenerg-900	443	19	,	,	PUNCT
fuelectenerg-900	443	20	is	be	AUX
fuelectenerg-900	443	21	described	describe	VERB
fuelectenerg-900	443	22	in	in	ADP
fuelectenerg-900	443	23	[	[	X
fuelectenerg-900	443	24	92	92	NUM
fuelectenerg-900	443	25	]	]	PUNCT
fuelectenerg-900	443	26	.	.	PUNCT
fuelectenerg-900	444	1	the	the	DET
fuelectenerg-900	444	2	actuation	actuation	NOUN
fuelectenerg-900	444	3	is	be	AUX
fuelectenerg-900	444	4	achieved	achieve	VERB
fuelectenerg-900	444	5	through	through	ADP
fuelectenerg-900	444	6	the	the	DET
fuelectenerg-900	444	7	electrostatic	electrostatic	ADJ
fuelectenerg-900	444	8	interaction	interaction	NOUN
fuelectenerg-900	444	9	between	between	ADP
fuelectenerg-900	444	10	the	the	DET
fuelectenerg-900	444	11	tube	tube	NOUN
fuelectenerg-900	444	12	and	and	CCONJ
fuelectenerg-900	444	13	the	the	DET
fuelectenerg-900	444	14	underneath	underneath	NOUN
fuelectenerg-900	444	15	gate	gate	PROPN
fuelectenerg-900	444	16	electrode	electrode	NOUN
fuelectenerg-900	444	17	,	,	PUNCT
fuelectenerg-900	444	18	while	while	SCONJ
fuelectenerg-900	444	19	the	the	DET
fuelectenerg-900	444	20	detection	detection	NOUN
fuelectenerg-900	444	21	rely	rely	VERB
fuelectenerg-900	444	22	on	on	ADP
fuelectenerg-900	444	23	nts	nt	NOUN
fuelectenerg-900	444	24	transistor	transistor	NOUN
fuelectenerg-900	444	25	properties	property	NOUN
fuelectenerg-900	444	26	,	,	PUNCT
fuelectenerg-900	444	27	i.e.	i.e.	X
fuelectenerg-900	444	28	on	on	ADP
fuelectenerg-900	444	29	the	the	DET
fuelectenerg-900	444	30	change	change	NOUN
fuelectenerg-900	444	31	in	in	ADP
fuelectenerg-900	444	32	the	the	DET
fuelectenerg-900	444	33	conductance	conductance	NOUN
fuelectenerg-900	444	34	of	of	ADP
fuelectenerg-900	444	35	nanotube	nanotube	NOUN
fuelectenerg-900	444	36	due	due	ADP
fuelectenerg-900	444	37	to	to	ADP
fuelectenerg-900	444	38	modulation	modulation	NOUN
fuelectenerg-900	444	39	of	of	ADP
fuelectenerg-900	444	40	ntgate	ntgate	ADJ
fuelectenerg-900	444	41	capacitance	capacitance	NOUN
fuelectenerg-900	444	42	,	,	PUNCT
fuelectenerg-900	444	43	which	which	PRON
fuelectenerg-900	444	44	is	be	AUX
fuelectenerg-900	444	45	caused	cause	VERB
fuelectenerg-900	444	46	by	by	ADP
fuelectenerg-900	444	47	vibration	vibration	NOUN
fuelectenerg-900	444	48	of	of	ADP
fuelectenerg-900	444	49	the	the	DET
fuelectenerg-900	444	50	nanotube	nanotube	NOUN
fuelectenerg-900	444	51	,	,	PUNCT
fuelectenerg-900	444	52	and	and	CCONJ
fuelectenerg-900	444	53	measured	measure	VERB
fuelectenerg-900	444	54	by	by	ADP
fuelectenerg-900	444	55	using	use	VERB
fuelectenerg-900	444	56	the	the	DET
fuelectenerg-900	444	57	frequency	frequency	NOUN
fuelectenerg-900	444	58	mixing	mix	VERB
fuelectenerg-900	444	59	technique	technique	NOUN
fuelectenerg-900	444	60	.	.	PUNCT
fuelectenerg-900	445	1	this	this	DET
fuelectenerg-900	445	2	method	method	NOUN
fuelectenerg-900	445	3	was	be	AUX
fuelectenerg-900	445	4	applied	apply	VERB
fuelectenerg-900	445	5	in	in	ADP
fuelectenerg-900	445	6	characterization	characterization	NOUN
fuelectenerg-900	445	7	of	of	ADP
fuelectenerg-900	445	8	doubleclamped	doubleclampe	VERB
fuelectenerg-900	445	9	swnts	swnt	NOUN
fuelectenerg-900	445	10	with	with	ADP
fuelectenerg-900	445	11	the	the	DET
fuelectenerg-900	445	12	diameter	diameter	NOUN
fuelectenerg-900	445	13	of	of	ADP
fuelectenerg-900	445	14	1	1	NUM
fuelectenerg-900	445	15	-	-	SYM
fuelectenerg-900	445	16	4	4	NUM
fuelectenerg-900	445	17	nm	nm	NOUN
fuelectenerg-900	445	18	,	,	PUNCT
fuelectenerg-900	445	19	the	the	DET
fuelectenerg-900	445	20	length	length	NOUN
fuelectenerg-900	445	21	of	of	ADP
fuelectenerg-900	445	22	1.75	1.75	NUM
fuelectenerg-900	445	23	-	-	SYM
fuelectenerg-900	445	24	3	3	NUM
fuelectenerg-900	445	25	m	m	PROPN
fuelectenerg-900	445	26	,	,	PUNCT
fuelectenerg-900	445	27	the	the	DET
fuelectenerg-900	445	28	resonance	resonance	NOUN
fuelectenerg-900	445	29	frequency	frequency	NOUN
fuelectenerg-900	445	30	in	in	ADP
fuelectenerg-900	445	31	the	the	DET
fuelectenerg-900	445	32	range	range	NOUN
fuelectenerg-900	445	33	of	of	ADP
fuelectenerg-900	445	34	5.1	5.1	NUM
fuelectenerg-900	445	35	-	-	SYM
fuelectenerg-900	445	36	333	333	NUM
fuelectenerg-900	445	37	mhz	mhz	NOUN
fuelectenerg-900	445	38	,	,	PUNCT
fuelectenerg-900	445	39	and	and	CCONJ
fuelectenerg-900	445	40	qs	qs	X
fuelectenerg-900	445	41	of	of	ADP
fuelectenerg-900	445	42	50	50	NUM
fuelectenerg-900	445	43	-	-	SYM
fuelectenerg-900	445	44	100	100	NUM
fuelectenerg-900	445	45	(	(	PUNCT
fuelectenerg-900	445	46	q=100	q=100	PROPN
fuelectenerg-900	445	47	corresponds	correspond	VERB
fuelectenerg-900	445	48	to	to	ADP
fuelectenerg-900	445	49	the	the	DET
fuelectenerg-900	445	50	nt	nt	NOUN
fuelectenerg-900	445	51	with	with	ADP
fuelectenerg-900	445	52	the	the	DET
fuelectenerg-900	445	53	lowest	low	ADJ
fuelectenerg-900	445	54	f0	f0	NOUN
fuelectenerg-900	445	55	,	,	PUNCT
fuelectenerg-900	445	56	and	and	CCONJ
fuelectenerg-900	445	57	q=50	q=50	NOUN
fuelectenerg-900	445	58	to	to	ADP
fuelectenerg-900	445	59	the	the	DET
fuelectenerg-900	445	60	highest	high	ADJ
fuelectenerg-900	445	61	f0	f0	PROPN
fuelectenerg-900	445	62	nt	not	PART
fuelectenerg-900	445	63	,	,	PUNCT
fuelectenerg-900	445	64	measured	measure	VERB
fuelectenerg-900	445	65	in	in	ADP
fuelectenerg-900	445	66	vacuum	vacuum	NOUN
fuelectenerg-900	445	67	at	at	ADP
fuelectenerg-900	445	68	room	room	NOUN
fuelectenerg-900	445	69	temperature	temperature	NOUN
fuelectenerg-900	445	70	)	)	PUNCT
fuelectenerg-900	446	1	[	[	X
fuelectenerg-900	446	2	93	93	NUM
fuelectenerg-900	446	3	]	]	PUNCT
fuelectenerg-900	446	4	.	.	PUNCT
fuelectenerg-900	447	1	nanotube	nanotube	ADJ
fuelectenerg-900	447	2	resonators	resonator	NOUN
fuelectenerg-900	447	3	operating	operate	VERB
fuelectenerg-900	447	4	at	at	ADP
fuelectenerg-900	447	5	the	the	DET
fuelectenerg-900	447	6	ghz	ghz	NOUN
fuelectenerg-900	447	7	range	range	NOUN
fuelectenerg-900	447	8	,	,	PUNCT
fuelectenerg-900	447	9	potentially	potentially	ADV
fuelectenerg-900	447	10	applicable	applicable	ADJ
fuelectenerg-900	447	11	in	in	ADP
fuelectenerg-900	447	12	rf	rf	NOUN
fuelectenerg-900	447	13	systems	system	NOUN
fuelectenerg-900	447	14	,	,	PUNCT
fuelectenerg-900	447	15	have	have	AUX
fuelectenerg-900	447	16	been	be	AUX
fuelectenerg-900	447	17	demonstrated	demonstrate	VERB
fuelectenerg-900	447	18	recently	recently	ADV
fuelectenerg-900	447	19	[	[	X
fuelectenerg-900	447	20	94	94	NUM
fuelectenerg-900	447	21	,	,	PUNCT
fuelectenerg-900	447	22	95	95	NUM
fuelectenerg-900	447	23	]	]	PUNCT
fuelectenerg-900	447	24	.	.	PUNCT
fuelectenerg-900	448	1	mechanical	mechanical	ADJ
fuelectenerg-900	448	2	resonances	resonance	NOUN
fuelectenerg-900	448	3	as	as	ADV
fuelectenerg-900	448	4	high	high	ADJ
fuelectenerg-900	448	5	as	as	ADP
fuelectenerg-900	448	6	39	39	NUM
fuelectenerg-900	448	7	ghz	ghz	NOUN
fuelectenerg-900	448	8	have	have	AUX
fuelectenerg-900	448	9	been	be	AUX
fuelectenerg-900	448	10	observed	observe	VERB
fuelectenerg-900	448	11	in	in	ADP
fuelectenerg-900	448	12	carbon	carbon	NOUN
fuelectenerg-900	448	13	nanotube	nanotube	NOUN
fuelectenerg-900	448	14	resonators	resonator	NOUN
fuelectenerg-900	448	15	[	[	X
fuelectenerg-900	448	16	96	96	NUM
fuelectenerg-900	448	17	]	]	PUNCT
fuelectenerg-900	448	18	.	.	PUNCT
fuelectenerg-900	449	1	typical	typical	ADJ
fuelectenerg-900	449	2	values	value	NOUN
fuelectenerg-900	449	3	of	of	ADP
fuelectenerg-900	449	4	nt	nt	ADP
fuelectenerg-900	449	5	resonators	resonator	NOUN
fuelectenerg-900	449	6	'	'	PART
fuelectenerg-900	449	7	q	q	NOUN
fuelectenerg-900	449	8	factor	factor	NOUN
fuelectenerg-900	449	9	(	(	PUNCT
fuelectenerg-900	449	10	from	from	ADP
fuelectenerg-900	449	11	the	the	DET
fuelectenerg-900	449	12	order	order	NOUN
fuelectenerg-900	449	13	of	of	ADP
fuelectenerg-900	449	14	10	10	NUM
fuelectenerg-900	449	15	to	to	ADP
fuelectenerg-900	449	16	the	the	DET
fuelectenerg-900	449	17	order	order	NOUN
fuelectenerg-900	449	18	of	of	ADP
fuelectenerg-900	449	19	100	100	NUM
fuelectenerg-900	449	20	at	at	ADP
fuelectenerg-900	449	21	the	the	DET
fuelectenerg-900	449	22	room	room	NOUN
fuelectenerg-900	449	23	temperature	temperature	NOUN
fuelectenerg-900	449	24	)	)	PUNCT
fuelectenerg-900	449	25	are	be	AUX
fuelectenerg-900	449	26	lower	low	ADJ
fuelectenerg-900	449	27	than	than	ADP
fuelectenerg-900	449	28	those	those	PRON
fuelectenerg-900	449	29	of	of	ADP
fuelectenerg-900	449	30	nems	nem	NOUN
fuelectenerg-900	449	31	resonators	resonator	NOUN
fuelectenerg-900	449	32	made	make	VERB
fuelectenerg-900	449	33	of	of	ADP
fuelectenerg-900	449	34	conventional	conventional	ADJ
fuelectenerg-900	449	35	materials	material	NOUN
fuelectenerg-900	449	36	.	.	PUNCT
fuelectenerg-900	450	1	for	for	ADP
fuelectenerg-900	450	2	example	example	NOUN
fuelectenerg-900	450	3	,	,	PUNCT
fuelectenerg-900	450	4	for	for	ADP
fuelectenerg-900	450	5	a	a	DET
fuelectenerg-900	450	6	doubly	doubly	ADV
fuelectenerg-900	450	7	-	-	PUNCT
fuelectenerg-900	450	8	clamped	clamp	VERB
fuelectenerg-900	450	9	swnt	swnt	NOUN
fuelectenerg-900	450	10	of	of	ADP
fuelectenerg-900	450	11	3	3	NUM
fuelectenerg-900	450	12	m	m	PROPN
fuelectenerg-900	450	13	in	in	ADP
fuelectenerg-900	450	14	length	length	NOUN
fuelectenerg-900	450	15	and	and	CCONJ
fuelectenerg-900	450	16	with	with	ADP
fuelectenerg-900	450	17	f0=26.1	f0=26.1	PROPN
fuelectenerg-900	450	18	mhz	mhz	NOUN
fuelectenerg-900	450	19	,	,	PUNCT
fuelectenerg-900	450	20	q	q	ADJ
fuelectenerg-900	450	21	factor	factor	NOUN
fuelectenerg-900	450	22	about	about	ADV
fuelectenerg-900	450	23	90	90	NUM
fuelectenerg-900	450	24	is	be	AUX
fuelectenerg-900	450	25	measured	measure	VERB
fuelectenerg-900	450	26	at	at	ADP
fuelectenerg-900	450	27	room	room	NOUN
fuelectenerg-900	450	28	temperature	temperature	NOUN
fuelectenerg-900	450	29	and	and	CCONJ
fuelectenerg-900	450	30	at	at	ADP
fuelectenerg-900	450	31	the	the	DET
fuelectenerg-900	450	32	pressure	pressure	NOUN
fuelectenerg-900	450	33	of	of	ADP
fuelectenerg-900	450	34	10	10	NUM
fuelectenerg-900	450	35	-4	-4	NOUN
fuelectenerg-900	450	36	torr	torr	NOUN
fuelectenerg-900	451	1	[	[	X
fuelectenerg-900	451	2	97	97	NUM
fuelectenerg-900	451	3	]	]	PUNCT
fuelectenerg-900	451	4	.	.	PUNCT
fuelectenerg-900	452	1	detailed	detailed	ADJ
fuelectenerg-900	452	2	consideration	consideration	NOUN
fuelectenerg-900	452	3	of	of	ADP
fuelectenerg-900	452	4	different	different	ADJ
fuelectenerg-900	452	5	dissipation	dissipation	NOUN
fuelectenerg-900	452	6	mechanisms	mechanism	NOUN
fuelectenerg-900	452	7	in	in	ADP
fuelectenerg-900	452	8	nt	nt	ADP
fuelectenerg-900	452	9	resonators	resonator	NOUN
fuelectenerg-900	452	10	is	be	AUX
fuelectenerg-900	452	11	performed	perform	VERB
fuelectenerg-900	452	12	in	in	ADP
fuelectenerg-900	452	13	[	[	X
fuelectenerg-900	452	14	98	98	NUM
fuelectenerg-900	452	15	]	]	PUNCT
fuelectenerg-900	452	16	.	.	PUNCT
fuelectenerg-900	453	1	lowering	lower	VERB
fuelectenerg-900	453	2	the	the	DET
fuelectenerg-900	453	3	temperature	temperature	NOUN
fuelectenerg-900	453	4	reduces	reduce	VERB
fuelectenerg-900	453	5	dissipation	dissipation	NOUN
fuelectenerg-900	453	6	,	,	PUNCT
fuelectenerg-900	453	7	allowing	allow	VERB
fuelectenerg-900	453	8	for	for	ADP
fuelectenerg-900	453	9	quality	quality	NOUN
fuelectenerg-900	453	10	factors	factor	NOUN
fuelectenerg-900	453	11	up	up	ADP
fuelectenerg-900	453	12	to	to	ADP
fuelectenerg-900	453	13	2000	2000	NUM
fuelectenerg-900	453	14	[	[	X
fuelectenerg-900	453	15	99	99	NUM
fuelectenerg-900	453	16	]	]	PUNCT
fuelectenerg-900	453	17	.	.	PUNCT
fuelectenerg-900	454	1	the	the	DET
fuelectenerg-900	454	2	highest	high	ADJ
fuelectenerg-900	454	3	reported	report	VERB
fuelectenerg-900	454	4	q	q	NOUN
fuelectenerg-900	454	5	in	in	ADP
fuelectenerg-900	454	6	nts	nt	NOUN
fuelectenerg-900	454	7	exceeds	exceed	VERB
fuelectenerg-900	454	8	10	10	NUM
fuelectenerg-900	454	9	5	5	NUM
fuelectenerg-900	454	10	(	(	PUNCT
fuelectenerg-900	454	11	swnt	swnt	NOUN
fuelectenerg-900	454	12	,	,	PUNCT
fuelectenerg-900	454	13	f0=350	f0=350	PROPN
fuelectenerg-900	454	14	mhz	mhz	PROPN
fuelectenerg-900	454	15	)	)	PUNCT
fuelectenerg-900	454	16	,	,	PUNCT
fuelectenerg-900	454	17	but	but	CCONJ
fuelectenerg-900	454	18	it	it	PRON
fuelectenerg-900	454	19	is	be	AUX
fuelectenerg-900	454	20	obtained	obtain	VERB
fuelectenerg-900	454	21	at	at	ADP
fuelectenerg-900	454	22	as	as	ADV
fuelectenerg-900	454	23	low	low	ADJ
fuelectenerg-900	454	24	a	a	DET
fuelectenerg-900	454	25	temperature	temperature	NOUN
fuelectenerg-900	454	26	as	as	ADP
fuelectenerg-900	454	27	25	25	NUM
fuelectenerg-900	454	28	mk	mk	NOUN
fuelectenerg-900	454	29	,	,	PUNCT
fuelectenerg-900	454	30	when	when	SCONJ
fuelectenerg-900	454	31	tensile	tensile	NOUN
fuelectenerg-900	454	32	strain	strain	NOUN
fuelectenerg-900	454	33	is	be	AUX
fuelectenerg-900	454	34	applied	apply	VERB
fuelectenerg-900	454	35	[	[	PUNCT
fuelectenerg-900	454	36	100	100	NUM
fuelectenerg-900	454	37	]	]	PUNCT
fuelectenerg-900	454	38	.	.	PUNCT
fuelectenerg-900	455	1	among	among	ADP
fuelectenerg-900	455	2	the	the	DET
fuelectenerg-900	455	3	highest	high	ADJ
fuelectenerg-900	455	4	q	q	ADJ
fuelectenerg-900	455	5	values	value	NOUN
fuelectenerg-900	455	6	(	(	PUNCT
fuelectenerg-900	455	7	about	about	ADP
fuelectenerg-900	455	8	700	700	NUM
fuelectenerg-900	455	9	)	)	PUNCT
fuelectenerg-900	455	10	reported	report	VERB
fuelectenerg-900	455	11	at	at	ADP
fuelectenerg-900	455	12	room	room	NOUN
fuelectenerg-900	455	13	temperature	temperature	NOUN
fuelectenerg-900	455	14	and	and	CCONJ
fuelectenerg-900	455	15	the	the	DET
fuelectenerg-900	455	16	pressure	pressure	NOUN
fuelectenerg-900	455	17	of	of	ADP
fuelectenerg-900	455	18	10	10	NUM
fuelectenerg-900	455	19	-4	-4	NOUN
fuelectenerg-900	455	20	torr	torr	PROPN
fuelectenerg-900	455	21	is	be	AUX
fuelectenerg-900	455	22	for	for	ADP
fuelectenerg-900	455	23	a	a	DET
fuelectenerg-900	455	24	doublyclamped	doublyclampe	VERB
fuelectenerg-900	455	25	swnt	swnt	NOUN
fuelectenerg-900	455	26	(	(	PUNCT
fuelectenerg-900	455	27	3	3	NUM
fuelectenerg-900	455	28	m	m	PROPN
fuelectenerg-900	455	29	length	length	NOUN
fuelectenerg-900	455	30	,	,	PUNCT
fuelectenerg-900	455	31	f083	f083	X
fuelectenerg-900	455	32	mhz	mhz	NOUN
fuelectenerg-900	455	33	)	)	PUNCT
fuelectenerg-900	455	34	,	,	PUNCT
fuelectenerg-900	455	35	and	and	CCONJ
fuelectenerg-900	455	36	the	the	DET
fuelectenerg-900	455	37	increase	increase	NOUN
fuelectenerg-900	455	38	of	of	ADP
fuelectenerg-900	455	39	q	q	NOUN
fuelectenerg-900	455	40	is	be	AUX
fuelectenerg-900	455	41	attained	attain	VERB
fuelectenerg-900	455	42	by	by	ADP
fuelectenerg-900	455	43	applying	apply	VERB
fuelectenerg-900	455	44	the	the	DET
fuelectenerg-900	455	45	parametric	parametric	ADJ
fuelectenerg-900	455	46	amplification	amplification	NOUN
fuelectenerg-900	455	47	concept	concept	NOUN
fuelectenerg-900	455	48	[	[	X
fuelectenerg-900	455	49	97	97	NUM
fuelectenerg-900	455	50	]	]	PUNCT
fuelectenerg-900	455	51	.	.	PUNCT
fuelectenerg-900	456	1	the	the	DET
fuelectenerg-900	456	2	frequency	frequency	NOUN
fuelectenerg-900	456	3	of	of	ADP
fuelectenerg-900	456	4	swnt	swnt	NOUN
fuelectenerg-900	456	5	resonators	resonator	NOUN
fuelectenerg-900	456	6	presented	present	VERB
fuelectenerg-900	456	7	in	in	ADP
fuelectenerg-900	456	8	[	[	X
fuelectenerg-900	456	9	97	97	NUM
fuelectenerg-900	456	10	]	]	PUNCT
fuelectenerg-900	456	11	is	be	AUX
fuelectenerg-900	456	12	tuned	tune	VERB
fuelectenerg-900	456	13	by	by	ADP
fuelectenerg-900	456	14	varying	vary	VERB
fuelectenerg-900	456	15	the	the	DET
fuelectenerg-900	456	16	gate	gate	NOUN
fuelectenerg-900	456	17	voltage	voltage	NOUN
fuelectenerg-900	456	18	,	,	PUNCT
fuelectenerg-900	456	19	which	which	PRON
fuelectenerg-900	456	20	changes	change	VERB
fuelectenerg-900	456	21	the	the	DET
fuelectenerg-900	456	22	electrostatic	electrostatic	ADJ
fuelectenerg-900	456	23	force	force	NOUN
fuelectenerg-900	456	24	,	,	PUNCT
fuelectenerg-900	456	25	so	so	SCONJ
fuelectenerg-900	456	26	both	both	CCONJ
fuelectenerg-900	456	27	the	the	DET
fuelectenerg-900	456	28	stretching	stretching	NOUN
fuelectenerg-900	456	29	(	(	PUNCT
fuelectenerg-900	456	30	i.e.	i.e.	X
fuelectenerg-900	456	31	the	the	DET
fuelectenerg-900	456	32	increase	increase	NOUN
fuelectenerg-900	456	33	of	of	ADP
fuelectenerg-900	456	34	tension	tension	NOUN
fuelectenerg-900	456	35	)	)	PUNCT
fuelectenerg-900	456	36	of	of	ADP
fuelectenerg-900	456	37	the	the	DET
fuelectenerg-900	456	38	nanotube	nanotube	NOUN
fuelectenerg-900	456	39	and	and	CCONJ
fuelectenerg-900	456	40	the	the	DET
fuelectenerg-900	456	41	electrostatic	electrostatic	ADJ
fuelectenerg-900	456	42	interaction	interaction	NOUN
fuelectenerg-900	456	43	with	with	ADP
fuelectenerg-900	456	44	the	the	DET
fuelectenerg-900	456	45	gate	gate	NOUN
fuelectenerg-900	456	46	occur	occur	VERB
fuelectenerg-900	456	47	,	,	PUNCT
fuelectenerg-900	456	48	changing	change	VERB
fuelectenerg-900	456	49	the	the	DET
fuelectenerg-900	456	50	nanotube	nanotube	ADJ
fuelectenerg-900	456	51	effective	effective	ADJ
fuelectenerg-900	456	52	spring	spring	NOUN
fuelectenerg-900	456	53	constant	constant	ADJ
fuelectenerg-900	456	54	.	.	PUNCT
fuelectenerg-900	457	1	at	at	ADP
fuelectenerg-900	457	2	the	the	DET
fuelectenerg-900	457	3	tuning	tuning	NOUN
fuelectenerg-900	457	4	voltage	voltage	NOUN
fuelectenerg-900	457	5	of	of	ADP
fuelectenerg-900	457	6	10	10	NUM
fuelectenerg-900	457	7	v	v	NOUN
fuelectenerg-900	457	8	,	,	PUNCT
fuelectenerg-900	457	9	the	the	DET
fuelectenerg-900	457	10	resonance	resonance	NOUN
fuelectenerg-900	457	11	frequency	frequency	NOUN
fuelectenerg-900	457	12	increase	increase	NOUN
fuelectenerg-900	457	13	of	of	ADP
fuelectenerg-900	457	14	as	as	ADV
fuelectenerg-900	457	15	much	much	ADJ
fuelectenerg-900	457	16	as	as	ADP
fuelectenerg-900	457	17	200	200	NUM
fuelectenerg-900	457	18	%	%	NOUN
fuelectenerg-900	457	19	(	(	PUNCT
fuelectenerg-900	457	20	the	the	DET
fuelectenerg-900	457	21	spring	spring	NOUN
fuelectenerg-900	457	22	hardening	harden	VERB
fuelectenerg-900	457	23	effect	effect	NOUN
fuelectenerg-900	457	24	due	due	ADP
fuelectenerg-900	457	25	to	to	ADP
fuelectenerg-900	457	26	increased	increase	VERB
fuelectenerg-900	457	27	tension	tension	NOUN
fuelectenerg-900	457	28	dominates	dominate	VERB
fuelectenerg-900	457	29	the	the	DET
fuelectenerg-900	457	30	electrostatically	electrostatically	ADV
fuelectenerg-900	457	31	induced	induce	VERB
fuelectenerg-900	457	32	spring	spring	NOUN
fuelectenerg-900	457	33	softening	soften	VERB
fuelectenerg-900	457	34	effect	effect	NOUN
fuelectenerg-900	457	35	)	)	PUNCT
fuelectenerg-900	457	36	is	be	AUX
fuelectenerg-900	457	37	reported	report	VERB
fuelectenerg-900	457	38	.	.	PUNCT
fuelectenerg-900	458	1	in	in	ADP
fuelectenerg-900	458	2	[	[	X
fuelectenerg-900	458	3	93	93	NUM
fuelectenerg-900	458	4	]	]	PUNCT
fuelectenerg-900	458	5	,	,	PUNCT
fuelectenerg-900	458	6	by	by	ADP
fuelectenerg-900	458	7	varying	vary	VERB
fuelectenerg-900	458	8	the	the	DET
fuelectenerg-900	458	9	gate	gate	NOUN
fuelectenerg-900	458	10	voltage	voltage	NOUN
fuelectenerg-900	458	11	from	from	ADP
fuelectenerg-900	458	12	2	2	NUM
fuelectenerg-900	458	13	v	v	NOUN
fuelectenerg-900	458	14	to	to	ADP
fuelectenerg-900	458	15	3.5	3.5	NUM
fuelectenerg-900	458	16	v	v	ADP
fuelectenerg-900	458	17	the	the	DET
fuelectenerg-900	458	18	tension	tension	NOUN
fuelectenerg-900	458	19	in	in	ADP
fuelectenerg-900	458	20	rf	rf	NOUN
fuelectenerg-900	458	21	mems	mem	NOUN
fuelectenerg-900	458	22	/	/	SYM
fuelectenerg-900	458	23	nems	nem	NOUN
fuelectenerg-900	458	24	resonators	resonator	NOUN
fuelectenerg-900	458	25	for	for	ADP
fuelectenerg-900	458	26	wireless	wireless	ADJ
fuelectenerg-900	458	27	communication	communication	NOUN
fuelectenerg-900	458	28	systems	system	NOUN
fuelectenerg-900	458	29	and	and	CCONJ
fuelectenerg-900	458	30	adsorption	adsorption	NOUN
fuelectenerg-900	458	31	-	-	PUNCT
fuelectenerg-900	458	32	desorption	desorption	NOUN
fuelectenerg-900	458	33	phase	phase	NOUN
fuelectenerg-900	458	34	noise	noise	NOUN
fuelectenerg-900	458	35	367	367	NUM
fuelectenerg-900	458	36	nt	not	PART
fuelectenerg-900	458	37	was	be	AUX
fuelectenerg-900	458	38	changed	change	VERB
fuelectenerg-900	458	39	,	,	PUNCT
fuelectenerg-900	458	40	thus	thus	ADV
fuelectenerg-900	458	41	enabling	enable	VERB
fuelectenerg-900	458	42	the	the	DET
fuelectenerg-900	458	43	adjustment	adjustment	NOUN
fuelectenerg-900	458	44	of	of	ADP
fuelectenerg-900	458	45	the	the	DET
fuelectenerg-900	458	46	resonance	resonance	NOUN
fuelectenerg-900	458	47	frequency	frequency	NOUN
fuelectenerg-900	458	48	in	in	ADP
fuelectenerg-900	458	49	the	the	DET
fuelectenerg-900	458	50	range	range	NOUN
fuelectenerg-900	458	51	714	714	NUM
fuelectenerg-900	458	52	mhz	mhz	NOUN
fuelectenerg-900	458	53	.	.	PUNCT
fuelectenerg-900	459	1	a	a	DET
fuelectenerg-900	459	2	tunable	tunable	ADJ
fuelectenerg-900	459	3	band	band	NOUN
fuelectenerg-900	459	4	-	-	PUNCT
fuelectenerg-900	459	5	pass	pass	NOUN
fuelectenerg-900	459	6	filter	filter	NOUN
fuelectenerg-900	459	7	utilizing	utilize	VERB
fuelectenerg-900	459	8	singly	singly	ADV
fuelectenerg-900	459	9	-	-	PUNCT
fuelectenerg-900	459	10	clamped	clamp	VERB
fuelectenerg-900	459	11	nt	not	PART
fuelectenerg-900	459	12	resonator	resonator	NOUN
fuelectenerg-900	459	13	is	be	AUX
fuelectenerg-900	459	14	analyzed	analyze	VERB
fuelectenerg-900	459	15	in	in	ADP
fuelectenerg-900	459	16	[	[	X
fuelectenerg-900	459	17	101	101	NUM
fuelectenerg-900	459	18	]	]	PUNCT
fuelectenerg-900	459	19	.	.	PUNCT
fuelectenerg-900	460	1	the	the	DET
fuelectenerg-900	460	2	center	center	NOUN
fuelectenerg-900	460	3	frequency	frequency	NOUN
fuelectenerg-900	460	4	and	and	CCONJ
fuelectenerg-900	460	5	the	the	DET
fuelectenerg-900	460	6	bandwidth	bandwidth	NOUN
fuelectenerg-900	460	7	of	of	ADP
fuelectenerg-900	460	8	the	the	DET
fuelectenerg-900	460	9	filter	filter	NOUN
fuelectenerg-900	460	10	are	be	AUX
fuelectenerg-900	460	11	voltage	voltage	NOUN
fuelectenerg-900	460	12	-	-	PUNCT
fuelectenerg-900	460	13	tunable	tunable	NOUN
fuelectenerg-900	460	14	:	:	PUNCT
fuelectenerg-900	460	15	the	the	DET
fuelectenerg-900	460	16	increase	increase	NOUN
fuelectenerg-900	460	17	of	of	ADP
fuelectenerg-900	460	18	the	the	DET
fuelectenerg-900	460	19	frequency	frequency	NOUN
fuelectenerg-900	460	20	by	by	ADP
fuelectenerg-900	460	21	over	over	ADP
fuelectenerg-900	460	22	100	100	NUM
fuelectenerg-900	460	23	%	%	NOUN
fuelectenerg-900	460	24	is	be	AUX
fuelectenerg-900	460	25	attainable	attainable	ADJ
fuelectenerg-900	460	26	by	by	ADP
fuelectenerg-900	460	27	varying	vary	VERB
fuelectenerg-900	460	28	the	the	DET
fuelectenerg-900	460	29	tuning	tuning	NOUN
fuelectenerg-900	460	30	voltage	voltage	NOUN
fuelectenerg-900	460	31	from	from	ADP
fuelectenerg-900	460	32	0	0	NUM
fuelectenerg-900	460	33	v	v	NOUN
fuelectenerg-900	460	34	to	to	ADP
fuelectenerg-900	460	35	50	50	NUM
fuelectenerg-900	460	36	v	v	NOUN
fuelectenerg-900	460	37	,	,	PUNCT
fuelectenerg-900	460	38	while	while	SCONJ
fuelectenerg-900	460	39	the	the	DET
fuelectenerg-900	460	40	bandwidth	bandwidth	NOUN
fuelectenerg-900	460	41	simultaneously	simultaneously	ADV
fuelectenerg-900	460	42	decreases	decrease	VERB
fuelectenerg-900	460	43	by	by	ADP
fuelectenerg-900	460	44	50	50	NUM
fuelectenerg-900	460	45	%	%	NOUN
fuelectenerg-900	460	46	.	.	PUNCT
fuelectenerg-900	461	1	graphene	graphene	NOUN
fuelectenerg-900	461	2	was	be	AUX
fuelectenerg-900	461	3	obtained	obtain	VERB
fuelectenerg-900	461	4	for	for	ADP
fuelectenerg-900	461	5	the	the	DET
fuelectenerg-900	461	6	first	first	ADJ
fuelectenerg-900	461	7	time	time	NOUN
fuelectenerg-900	461	8	by	by	ADP
fuelectenerg-900	461	9	mechanical	mechanical	ADJ
fuelectenerg-900	461	10	exfoliation	exfoliation	NOUN
fuelectenerg-900	461	11	from	from	ADP
fuelectenerg-900	461	12	graphite	graphite	NOUN
fuelectenerg-900	461	13	[	[	X
fuelectenerg-900	461	14	102	102	NUM
fuelectenerg-900	461	15	]	]	PUNCT
fuelectenerg-900	461	16	.	.	PUNCT
fuelectenerg-900	462	1	nowadays	nowadays	ADV
fuelectenerg-900	462	2	,	,	PUNCT
fuelectenerg-900	462	3	graphene	graphene	ADJ
fuelectenerg-900	462	4	structures	structure	NOUN
fuelectenerg-900	462	5	can	can	AUX
fuelectenerg-900	462	6	be	be	AUX
fuelectenerg-900	462	7	fabricated	fabricate	VERB
fuelectenerg-900	462	8	by	by	ADP
fuelectenerg-900	462	9	a	a	DET
fuelectenerg-900	462	10	combination	combination	NOUN
fuelectenerg-900	462	11	of	of	ADP
fuelectenerg-900	462	12	top	top	ADJ
fuelectenerg-900	462	13	-	-	PUNCT
fuelectenerg-900	462	14	down	down	NOUN
fuelectenerg-900	462	15	and	and	CCONJ
fuelectenerg-900	462	16	bottom	bottom	NOUN
fuelectenerg-900	462	17	-	-	PUNCT
fuelectenerg-900	462	18	up	up	ADP
fuelectenerg-900	462	19	methods	method	NOUN
fuelectenerg-900	462	20	.	.	PUNCT
fuelectenerg-900	463	1	unlike	unlike	ADP
fuelectenerg-900	463	2	nts	nt	NOUN
fuelectenerg-900	463	3	,	,	PUNCT
fuelectenerg-900	463	4	graphene	graphene	NOUN
fuelectenerg-900	463	5	can	can	AUX
fuelectenerg-900	463	6	be	be	AUX
fuelectenerg-900	463	7	grown	grow	VERB
fuelectenerg-900	463	8	over	over	ADP
fuelectenerg-900	463	9	large	large	ADJ
fuelectenerg-900	463	10	areas	area	NOUN
fuelectenerg-900	463	11	(	(	PUNCT
fuelectenerg-900	463	12	using	use	VERB
fuelectenerg-900	463	13	cvd	cvd	NOUN
fuelectenerg-900	463	14	or	or	CCONJ
fuelectenerg-900	463	15	sic	sic	ADJ
fuelectenerg-900	463	16	annealing	annealing	NOUN
fuelectenerg-900	463	17	)	)	PUNCT
fuelectenerg-900	463	18	.	.	PUNCT
fuelectenerg-900	464	1	moreover	moreover	ADV
fuelectenerg-900	464	2	,	,	PUNCT
fuelectenerg-900	464	3	graphene	graphene	NOUN
fuelectenerg-900	464	4	can	can	AUX
fuelectenerg-900	464	5	be	be	AUX
fuelectenerg-900	464	6	patterned	pattern	VERB
fuelectenerg-900	464	7	at	at	ADP
fuelectenerg-900	464	8	the	the	DET
fuelectenerg-900	464	9	wafer	wafer	NOUN
fuelectenerg-900	464	10	scale	scale	NOUN
fuelectenerg-900	464	11	by	by	ADP
fuelectenerg-900	464	12	standard	standard	ADJ
fuelectenerg-900	464	13	lithographic	lithographic	ADJ
fuelectenerg-900	464	14	processes	process	NOUN
fuelectenerg-900	464	15	,	,	PUNCT
fuelectenerg-900	464	16	compatible	compatible	ADJ
fuelectenerg-900	464	17	with	with	ADP
fuelectenerg-900	464	18	other	other	ADJ
fuelectenerg-900	464	19	top	top	ADJ
fuelectenerg-900	464	20	-	-	PUNCT
fuelectenerg-900	464	21	down	down	ADP
fuelectenerg-900	464	22	processing	processing	NOUN
fuelectenerg-900	464	23	techniques	technique	NOUN
fuelectenerg-900	464	24	,	,	PUNCT
fuelectenerg-900	464	25	which	which	PRON
fuelectenerg-900	464	26	makes	make	VERB
fuelectenerg-900	464	27	its	its	PRON
fuelectenerg-900	464	28	integration	integration	NOUN
fuelectenerg-900	464	29	with	with	ADP
fuelectenerg-900	464	30	other	other	ADJ
fuelectenerg-900	464	31	components	component	NOUN
fuelectenerg-900	464	32	possible	possible	ADJ
fuelectenerg-900	464	33	.	.	PUNCT
fuelectenerg-900	465	1	the	the	DET
fuelectenerg-900	465	2	first	first	ADJ
fuelectenerg-900	465	3	graphene	graphene	NOUN
fuelectenerg-900	465	4	electromechanical	electromechanical	ADJ
fuelectenerg-900	465	5	resonator	resonator	NOUN
fuelectenerg-900	465	6	was	be	AUX
fuelectenerg-900	465	7	demonstrated	demonstrate	VERB
fuelectenerg-900	465	8	in	in	ADP
fuelectenerg-900	465	9	2007	2007	NUM
fuelectenerg-900	465	10	[	[	X
fuelectenerg-900	465	11	103	103	NUM
fuelectenerg-900	465	12	]	]	PUNCT
fuelectenerg-900	465	13	.	.	PUNCT
fuelectenerg-900	466	1	the	the	DET
fuelectenerg-900	466	2	motion	motion	NOUN
fuelectenerg-900	466	3	of	of	ADP
fuelectenerg-900	466	4	a	a	DET
fuelectenerg-900	466	5	suspended	suspend	VERB
fuelectenerg-900	466	6	graphene	graphene	NOUN
fuelectenerg-900	466	7	sheet	sheet	NOUN
fuelectenerg-900	466	8	(	(	PUNCT
fuelectenerg-900	466	9	in	in	ADP
fuelectenerg-900	466	10	the	the	DET
fuelectenerg-900	466	11	form	form	NOUN
fuelectenerg-900	466	12	of	of	ADP
fuelectenerg-900	466	13	a	a	DET
fuelectenerg-900	466	14	doubly	doubly	ADV
fuelectenerg-900	466	15	-	-	PUNCT
fuelectenerg-900	466	16	clamped	clamp	VERB
fuelectenerg-900	466	17	beam	beam	NOUN
fuelectenerg-900	466	18	)	)	PUNCT
fuelectenerg-900	466	19	was	be	AUX
fuelectenerg-900	466	20	actuated	actuate	VERB
fuelectenerg-900	466	21	by	by	ADP
fuelectenerg-900	466	22	using	use	VERB
fuelectenerg-900	466	23	the	the	DET
fuelectenerg-900	466	24	laser	laser	NOUN
fuelectenerg-900	466	25	-	-	PUNCT
fuelectenerg-900	466	26	based	base	VERB
fuelectenerg-900	466	27	optical	optical	ADJ
fuelectenerg-900	466	28	method	method	NOUN
fuelectenerg-900	466	29	or	or	CCONJ
fuelectenerg-900	466	30	electrical	electrical	ADJ
fuelectenerg-900	466	31	method	method	NOUN
fuelectenerg-900	466	32	,	,	PUNCT
fuelectenerg-900	466	33	and	and	CCONJ
fuelectenerg-900	466	34	for	for	ADP
fuelectenerg-900	466	35	detection	detection	NOUN
fuelectenerg-900	466	36	an	an	DET
fuelectenerg-900	466	37	interferometric	interferometric	ADJ
fuelectenerg-900	466	38	method	method	NOUN
fuelectenerg-900	466	39	was	be	AUX
fuelectenerg-900	466	40	applied	apply	VERB
fuelectenerg-900	466	41	.	.	PUNCT
fuelectenerg-900	467	1	subsequently	subsequently	ADV
fuelectenerg-900	467	2	,	,	PUNCT
fuelectenerg-900	467	3	electrostatic	electrostatic	ADJ
fuelectenerg-900	467	4	excitation	excitation	NOUN
fuelectenerg-900	467	5	of	of	ADP
fuelectenerg-900	467	6	mechanical	mechanical	ADJ
fuelectenerg-900	467	7	vibrations	vibration	NOUN
fuelectenerg-900	467	8	combined	combine	VERB
fuelectenerg-900	467	9	with	with	ADP
fuelectenerg-900	467	10	spm	spm	PROPN
fuelectenerg-900	467	11	(	(	PUNCT
fuelectenerg-900	467	12	scanning	scan	VERB
fuelectenerg-900	467	13	probe	probe	NOUN
fuelectenerg-900	467	14	microscopy	microscopy	NOUN
fuelectenerg-900	467	15	)	)	PUNCT
fuelectenerg-900	467	16	detection	detection	NOUN
fuelectenerg-900	467	17	was	be	AUX
fuelectenerg-900	467	18	used	use	VERB
fuelectenerg-900	467	19	for	for	ADP
fuelectenerg-900	467	20	graphene	graphene	ADJ
fuelectenerg-900	467	21	resonators	resonator	NOUN
fuelectenerg-900	467	22	[	[	X
fuelectenerg-900	467	23	104	104	NUM
fuelectenerg-900	467	24	]	]	PUNCT
fuelectenerg-900	467	25	.	.	PUNCT
fuelectenerg-900	468	1	the	the	DET
fuelectenerg-900	468	2	electrical	electrical	ADJ
fuelectenerg-900	468	3	detection	detection	NOUN
fuelectenerg-900	468	4	method	method	NOUN
fuelectenerg-900	468	5	,	,	PUNCT
fuelectenerg-900	468	6	based	base	VERB
fuelectenerg-900	468	7	on	on	ADP
fuelectenerg-900	468	8	the	the	DET
fuelectenerg-900	468	9	change	change	NOUN
fuelectenerg-900	468	10	of	of	ADP
fuelectenerg-900	468	11	conductivity	conductivity	NOUN
fuelectenerg-900	468	12	of	of	ADP
fuelectenerg-900	468	13	vibrating	vibrate	VERB
fuelectenerg-900	468	14	single	single	ADJ
fuelectenerg-900	468	15	-	-	PUNCT
fuelectenerg-900	468	16	layer	layer	NOUN
fuelectenerg-900	468	17	graphene	graphene	NOUN
fuelectenerg-900	468	18	due	due	ADP
fuelectenerg-900	468	19	to	to	ADP
fuelectenerg-900	468	20	the	the	DET
fuelectenerg-900	468	21	change	change	NOUN
fuelectenerg-900	468	22	of	of	ADP
fuelectenerg-900	468	23	its	its	PRON
fuelectenerg-900	468	24	distance	distance	NOUN
fuelectenerg-900	468	25	from	from	ADP
fuelectenerg-900	468	26	the	the	DET
fuelectenerg-900	468	27	gate	gate	NOUN
fuelectenerg-900	468	28	,	,	PUNCT
fuelectenerg-900	468	29	is	be	AUX
fuelectenerg-900	468	30	described	describe	VERB
fuelectenerg-900	468	31	in	in	ADP
fuelectenerg-900	468	32	[	[	X
fuelectenerg-900	468	33	105	105	NUM
fuelectenerg-900	468	34	]	]	PUNCT
fuelectenerg-900	468	35	,	,	PUNCT
fuelectenerg-900	468	36	where	where	SCONJ
fuelectenerg-900	468	37	the	the	DET
fuelectenerg-900	468	38	feasibility	feasibility	NOUN
fuelectenerg-900	468	39	of	of	ADP
fuelectenerg-900	468	40	actuating	actuate	VERB
fuelectenerg-900	468	41	and	and	CCONJ
fuelectenerg-900	468	42	detecting	detect	VERB
fuelectenerg-900	468	43	resonance	resonance	NOUN
fuelectenerg-900	468	44	on	on	ADP
fuelectenerg-900	468	45	a	a	DET
fuelectenerg-900	468	46	single	single	ADJ
fuelectenerg-900	468	47	chip	chip	NOUN
fuelectenerg-900	468	48	was	be	AUX
fuelectenerg-900	468	49	confirmed	confirm	VERB
fuelectenerg-900	468	50	.	.	PUNCT
fuelectenerg-900	469	1	graphene	graphene	VERB
fuelectenerg-900	469	2	resonators	resonator	NOUN
fuelectenerg-900	469	3	in	in	ADP
fuelectenerg-900	469	4	the	the	DET
fuelectenerg-900	469	5	form	form	NOUN
fuelectenerg-900	469	6	of	of	ADP
fuelectenerg-900	469	7	doubly	doubly	ADV
fuelectenerg-900	469	8	-	-	PUNCT
fuelectenerg-900	469	9	clamped	clamp	VERB
fuelectenerg-900	469	10	beams	beam	NOUN
fuelectenerg-900	469	11	have	have	VERB
fuelectenerg-900	469	12	q	q	NOUN
fuelectenerg-900	469	13	of	of	ADP
fuelectenerg-900	469	14	the	the	DET
fuelectenerg-900	469	15	order	order	NOUN
fuelectenerg-900	469	16	of	of	ADP
fuelectenerg-900	469	17	10100	10100	NUM
fuelectenerg-900	469	18	.	.	PUNCT
fuelectenerg-900	470	1	for	for	ADP
fuelectenerg-900	470	2	example	example	NOUN
fuelectenerg-900	470	3	,	,	PUNCT
fuelectenerg-900	470	4	a	a	DET
fuelectenerg-900	470	5	single	single	ADJ
fuelectenerg-900	470	6	-	-	PUNCT
fuelectenerg-900	470	7	layer	layer	NOUN
fuelectenerg-900	470	8	graphene	graphene	NOUN
fuelectenerg-900	470	9	beam	beam	NOUN
fuelectenerg-900	470	10	(	(	PUNCT
fuelectenerg-900	470	11	1100	1100	NUM
fuelectenerg-900	470	12			PROPN
fuelectenerg-900	470	13	1930	1930	NUM
fuelectenerg-900	470	14			VERB
fuelectenerg-900	470	15	0.3	0.3	NUM
fuelectenerg-900	470	16	nm	nm	PROPN
fuelectenerg-900	470	17	3	3	NUM
fuelectenerg-900	470	18	)	)	PUNCT
fuelectenerg-900	470	19	has	have	AUX
fuelectenerg-900	470	20	f0=70.5	f0=70.5	NOUN
fuelectenerg-900	470	21	mhz	mhz	NOUN
fuelectenerg-900	470	22	and	and	CCONJ
fuelectenerg-900	470	23	q=78	q=78	NOUN
fuelectenerg-900	470	24	,	,	PUNCT
fuelectenerg-900	470	25	and	and	CCONJ
fuelectenerg-900	470	26	a	a	DET
fuelectenerg-900	470	27	15	15	NUM
fuelectenerg-900	470	28	nm	nm	ADV
fuelectenerg-900	470	29	thick	thick	ADJ
fuelectenerg-900	470	30	multilayer	multilayer	ADJ
fuelectenerg-900	470	31	graphene	graphene	NOUN
fuelectenerg-900	470	32	beam	beam	NOUN
fuelectenerg-900	470	33	has	have	VERB
fuelectenerg-900	470	34	f0=42	f0=42	PROPN
fuelectenerg-900	470	35	mhz	mhz	NOUN
fuelectenerg-900	470	36	and	and	CCONJ
fuelectenerg-900	470	37	q=210	q=210	ADV
fuelectenerg-900	470	38	,	,	PUNCT
fuelectenerg-900	470	39	both	both	CCONJ
fuelectenerg-900	470	40	at	at	ADP
fuelectenerg-900	470	41	room	room	NOUN
fuelectenerg-900	470	42	temperature	temperature	NOUN
fuelectenerg-900	470	43	and	and	CCONJ
fuelectenerg-900	470	44	pressure	pressure	NOUN
fuelectenerg-900	470	45	below	below	ADP
fuelectenerg-900	470	46	10	10	NUM
fuelectenerg-900	470	47	-6	-6	NOUN
fuelectenerg-900	470	48	torr	torr	NOUN
fuelectenerg-900	471	1	[	[	X
fuelectenerg-900	471	2	103	103	NUM
fuelectenerg-900	471	3	]	]	PUNCT
fuelectenerg-900	471	4	.	.	PUNCT
fuelectenerg-900	472	1	a	a	DET
fuelectenerg-900	472	2	graphene	graphene	ADJ
fuelectenerg-900	472	3	resonator	resonator	NOUN
fuelectenerg-900	472	4	in	in	ADP
fuelectenerg-900	472	5	the	the	DET
fuelectenerg-900	472	6	form	form	NOUN
fuelectenerg-900	472	7	of	of	ADP
fuelectenerg-900	472	8	a	a	DET
fuelectenerg-900	472	9	circular	circular	ADJ
fuelectenerg-900	472	10	membrane	membrane	NOUN
fuelectenerg-900	472	11	(	(	PUNCT
fuelectenerg-900	472	12	4	4	NUM
fuelectenerg-900	472	13	m	m	PROPN
fuelectenerg-900	472	14	in	in	ADP
fuelectenerg-900	472	15	diameter	diameter	NOUN
fuelectenerg-900	472	16	)	)	PUNCT
fuelectenerg-900	472	17	has	have	VERB
fuelectenerg-900	472	18	f0=52.19	f0=52.19	NUM
fuelectenerg-900	472	19	mhz	mhz	NOUN
fuelectenerg-900	472	20	and	and	CCONJ
fuelectenerg-900	472	21	q=55	q=55	NOUN
fuelectenerg-900	473	1	[	[	X
fuelectenerg-900	473	2	68	68	NUM
fuelectenerg-900	473	3	]	]	PUNCT
fuelectenerg-900	473	4	.	.	PUNCT
fuelectenerg-900	473	5	drum	drum	VERB
fuelectenerg-900	473	6	-	-	PUNCT
fuelectenerg-900	473	7	like	like	ADJ
fuelectenerg-900	473	8	graphene	graphene	NOUN
fuelectenerg-900	473	9	resonators	resonator	NOUN
fuelectenerg-900	473	10	of	of	ADP
fuelectenerg-900	473	11	high	high	ADJ
fuelectenerg-900	473	12	q	q	NOUN
fuelectenerg-900	473	13	factor	factor	NOUN
fuelectenerg-900	473	14	are	be	AUX
fuelectenerg-900	473	15	also	also	ADV
fuelectenerg-900	473	16	reported	report	VERB
fuelectenerg-900	473	17	;	;	PUNCT
fuelectenerg-900	473	18	for	for	ADP
fuelectenerg-900	473	19	example	example	NOUN
fuelectenerg-900	473	20	,	,	PUNCT
fuelectenerg-900	473	21	the	the	DET
fuelectenerg-900	473	22	q	q	NOUN
fuelectenerg-900	473	23	factor	factor	NOUN
fuelectenerg-900	473	24	about	about	ADV
fuelectenerg-900	473	25	2400	2400	NUM
fuelectenerg-900	473	26	is	be	AUX
fuelectenerg-900	473	27	obtained	obtain	VERB
fuelectenerg-900	473	28	at	at	ADP
fuelectenerg-900	473	29	the	the	DET
fuelectenerg-900	473	30	room	room	NOUN
fuelectenerg-900	473	31	temperature	temperature	NOUN
fuelectenerg-900	473	32	and	and	CCONJ
fuelectenerg-900	473	33	pressure	pressure	NOUN
fuelectenerg-900	473	34	lower	low	ADJ
fuelectenerg-900	473	35	than	than	ADP
fuelectenerg-900	473	36	610	610	NUM
fuelectenerg-900	473	37	-3	-3	PUNCT
fuelectenerg-900	473	38	torr	torr	NOUN
fuelectenerg-900	473	39	for	for	ADP
fuelectenerg-900	473	40	the	the	DET
fuelectenerg-900	473	41	membrane	membrane	NOUN
fuelectenerg-900	473	42	of	of	ADP
fuelectenerg-900	473	43	22.5	22.5	NUM
fuelectenerg-900	473	44	m	m	PROPN
fuelectenerg-900	473	45	in	in	ADP
fuelectenerg-900	473	46	diameter	diameter	NOUN
fuelectenerg-900	473	47	(	(	PUNCT
fuelectenerg-900	473	48	f0	f0	VERB
fuelectenerg-900	473	49	about	about	ADV
fuelectenerg-900	473	50	4	4	NUM
fuelectenerg-900	473	51	mhz	mhz	NOUN
fuelectenerg-900	473	52	)	)	PUNCT
fuelectenerg-900	474	1	[	[	X
fuelectenerg-900	474	2	106	106	NUM
fuelectenerg-900	474	3	]	]	PUNCT
fuelectenerg-900	474	4	.	.	PUNCT
fuelectenerg-900	475	1	in	in	ADP
fuelectenerg-900	475	2	graphene	graphene	NOUN
fuelectenerg-900	475	3	resonators	resonator	NOUN
fuelectenerg-900	475	4	q	q	NOUN
fuelectenerg-900	475	5	increases	increase	NOUN
fuelectenerg-900	475	6	as	as	SCONJ
fuelectenerg-900	475	7	the	the	DET
fuelectenerg-900	475	8	temperature	temperature	NOUN
fuelectenerg-900	475	9	decreases	decrease	VERB
fuelectenerg-900	475	10	.	.	PUNCT
fuelectenerg-900	476	1	as	as	SCONJ
fuelectenerg-900	476	2	the	the	DET
fuelectenerg-900	476	3	temperature	temperature	NOUN
fuelectenerg-900	476	4	decreases	decrease	VERB
fuelectenerg-900	476	5	to	to	ADP
fuelectenerg-900	476	6	50	50	NUM
fuelectenerg-900	476	7	k	k	NOUN
fuelectenerg-900	476	8	,	,	PUNCT
fuelectenerg-900	476	9	the	the	DET
fuelectenerg-900	476	10	q	q	ADJ
fuelectenerg-900	476	11	factor	factor	NOUN
fuelectenerg-900	476	12	of	of	ADP
fuelectenerg-900	476	13	beam	beam	NOUN
fuelectenerg-900	476	14	resonators	resonator	NOUN
fuelectenerg-900	476	15	rises	rise	VERB
fuelectenerg-900	476	16	above	above	ADP
fuelectenerg-900	476	17	1000	1000	NUM
fuelectenerg-900	476	18	[	[	X
fuelectenerg-900	476	19	103	103	NUM
fuelectenerg-900	476	20	]	]	PUNCT
fuelectenerg-900	476	21	,	,	PUNCT
fuelectenerg-900	476	22	while	while	SCONJ
fuelectenerg-900	476	23	at	at	ADP
fuelectenerg-900	476	24	5	5	NUM
fuelectenerg-900	476	25	k	k	NOUN
fuelectenerg-900	476	26	it	it	PRON
fuelectenerg-900	476	27	can	can	AUX
fuelectenerg-900	476	28	be	be	AUX
fuelectenerg-900	476	29	as	as	ADV
fuelectenerg-900	476	30	high	high	ADJ
fuelectenerg-900	476	31	as	as	ADP
fuelectenerg-900	476	32	10000	10000	NUM
fuelectenerg-900	476	33	(	(	PUNCT
fuelectenerg-900	476	34	f0=130	f0=130	NOUN
fuelectenerg-900	476	35	mhz	mhz	NOUN
fuelectenerg-900	476	36	)	)	PUNCT
fuelectenerg-900	477	1	[	[	X
fuelectenerg-900	477	2	105	105	NUM
fuelectenerg-900	477	3	]	]	PUNCT
fuelectenerg-900	477	4	.	.	PUNCT
fuelectenerg-900	478	1	energy	energy	NOUN
fuelectenerg-900	478	2	dissipation	dissipation	NOUN
fuelectenerg-900	478	3	mechanisms	mechanism	NOUN
fuelectenerg-900	478	4	that	that	PRON
fuelectenerg-900	478	5	determine	determine	VERB
fuelectenerg-900	478	6	the	the	DET
fuelectenerg-900	478	7	q	q	NOUN
fuelectenerg-900	478	8	factor	factor	NOUN
fuelectenerg-900	478	9	value	value	NOUN
fuelectenerg-900	478	10	in	in	ADP
fuelectenerg-900	478	11	graphene	graphene	NOUN
fuelectenerg-900	478	12	resonators	resonator	NOUN
fuelectenerg-900	478	13	are	be	AUX
fuelectenerg-900	478	14	reviewed	review	VERB
fuelectenerg-900	478	15	in	in	ADP
fuelectenerg-900	478	16	detail	detail	NOUN
fuelectenerg-900	478	17	in	in	ADP
fuelectenerg-900	478	18	[	[	X
fuelectenerg-900	478	19	98	98	NUM
fuelectenerg-900	478	20	]	]	PUNCT
fuelectenerg-900	478	21	.	.	PUNCT
fuelectenerg-900	479	1	due	due	ADP
fuelectenerg-900	479	2	to	to	ADP
fuelectenerg-900	479	3	a	a	DET
fuelectenerg-900	479	4	built	build	VERB
fuelectenerg-900	479	5	-	-	PUNCT
fuelectenerg-900	479	6	in	in	ADP
fuelectenerg-900	479	7	tension	tension	NOUN
fuelectenerg-900	479	8	,	,	PUNCT
fuelectenerg-900	479	9	resonance	resonance	NOUN
fuelectenerg-900	479	10	frequencies	frequency	NOUN
fuelectenerg-900	479	11	of	of	ADP
fuelectenerg-900	479	12	graphene	graphene	NOUN
fuelectenerg-900	479	13	resonators	resonator	NOUN
fuelectenerg-900	479	14	are	be	AUX
fuelectenerg-900	479	15	higher	high	ADJ
fuelectenerg-900	479	16	than	than	SCONJ
fuelectenerg-900	479	17	expected	expect	VERB
fuelectenerg-900	479	18	for	for	ADP
fuelectenerg-900	479	19	structures	structure	NOUN
fuelectenerg-900	479	20	of	of	ADP
fuelectenerg-900	479	21	given	give	VERB
fuelectenerg-900	479	22	dimensions	dimension	NOUN
fuelectenerg-900	479	23	and	and	CCONJ
fuelectenerg-900	479	24	predicted	predict	VERB
fuelectenerg-900	479	25	by	by	ADP
fuelectenerg-900	479	26	bending	bend	VERB
fuelectenerg-900	479	27	alone	alone	ADV
fuelectenerg-900	479	28	.	.	PUNCT
fuelectenerg-900	480	1	the	the	DET
fuelectenerg-900	480	2	built	build	VERB
fuelectenerg-900	480	3	-	-	PUNCT
fuelectenerg-900	480	4	in	in	ADP
fuelectenerg-900	480	5	tension	tension	NOUN
fuelectenerg-900	480	6	originates	originate	NOUN
fuelectenerg-900	480	7	from	from	ADP
fuelectenerg-900	480	8	the	the	DET
fuelectenerg-900	480	9	fabrication	fabrication	NOUN
fuelectenerg-900	480	10	process	process	NOUN
fuelectenerg-900	480	11	[	[	X
fuelectenerg-900	480	12	103	103	NUM
fuelectenerg-900	480	13	]	]	PUNCT
fuelectenerg-900	480	14	.	.	PUNCT
fuelectenerg-900	481	1	a	a	DET
fuelectenerg-900	481	2	typical	typical	ADJ
fuelectenerg-900	481	3	built	build	VERB
fuelectenerg-900	481	4	-	-	PUNCT
fuelectenerg-900	481	5	in	in	ADP
fuelectenerg-900	481	6	strain	strain	NOUN
fuelectenerg-900	481	7	is	be	AUX
fuelectenerg-900	481	8	of	of	ADP
fuelectenerg-900	481	9	the	the	DET
fuelectenerg-900	481	10	order	order	NOUN
fuelectenerg-900	481	11	of	of	ADP
fuelectenerg-900	481	12	10	10	NUM
fuelectenerg-900	481	13	-5	-5	ADJ
fuelectenerg-900	481	14	-10	-10	PUNCT
fuelectenerg-900	481	15	-4	-4	PUNCT
fuelectenerg-900	482	1	[	[	X
fuelectenerg-900	482	2	105	105	NUM
fuelectenerg-900	482	3	]	]	PUNCT
fuelectenerg-900	482	4	.	.	PUNCT
fuelectenerg-900	483	1	a	a	DET
fuelectenerg-900	483	2	high	high	ADJ
fuelectenerg-900	483	3	tunability	tunability	NOUN
fuelectenerg-900	483	4	of	of	ADP
fuelectenerg-900	483	5	graphene	graphene	ADJ
fuelectenerg-900	483	6	resonance	resonance	NOUN
fuelectenerg-900	483	7	with	with	ADP
fuelectenerg-900	483	8	the	the	DET
fuelectenerg-900	483	9	applied	apply	VERB
fuelectenerg-900	483	10	gate	gate	NOUN
fuelectenerg-900	483	11	voltage	voltage	NOUN
fuelectenerg-900	483	12	that	that	PRON
fuelectenerg-900	483	13	induces	induce	VERB
fuelectenerg-900	483	14	tension	tension	NOUN
fuelectenerg-900	483	15	in	in	ADP
fuelectenerg-900	483	16	the	the	DET
fuelectenerg-900	483	17	resonant	resonant	ADJ
fuelectenerg-900	483	18	structure	structure	NOUN
fuelectenerg-900	483	19	is	be	AUX
fuelectenerg-900	483	20	observed	observe	VERB
fuelectenerg-900	483	21	[	[	X
fuelectenerg-900	483	22	105	105	NUM
fuelectenerg-900	483	23	]	]	PUNCT
fuelectenerg-900	483	24	.	.	PUNCT
fuelectenerg-900	484	1	the	the	DET
fuelectenerg-900	484	2	resonance	resonance	NOUN
fuelectenerg-900	484	3	frequency	frequency	NOUN
fuelectenerg-900	484	4	of	of	ADP
fuelectenerg-900	484	5	a	a	DET
fuelectenerg-900	484	6	3	3	NUM
fuelectenerg-900	484	7	m	m	PROPN
fuelectenerg-900	484	8	wide	wide	ADJ
fuelectenerg-900	484	9	and	and	CCONJ
fuelectenerg-900	484	10	1.1	1.1	NUM
fuelectenerg-900	484	11	m	m	PROPN
fuelectenerg-900	484	12	long	long	ADJ
fuelectenerg-900	484	13	single	single	ADJ
fuelectenerg-900	484	14	-	-	PUNCT
fuelectenerg-900	484	15	layer	layer	NOUN
fuelectenerg-900	484	16	graphene	graphene	NOUN
fuelectenerg-900	484	17	beam	beam	NOUN
fuelectenerg-900	484	18	increases	increase	NOUN
fuelectenerg-900	484	19	from	from	ADP
fuelectenerg-900	484	20	30	30	NUM
fuelectenerg-900	484	21	mhz	mhz	NOUN
fuelectenerg-900	484	22	to	to	ADP
fuelectenerg-900	484	23	65	65	NUM
fuelectenerg-900	484	24	mhz	mhz	NOUN
fuelectenerg-900	484	25	as	as	SCONJ
fuelectenerg-900	484	26	the	the	DET
fuelectenerg-900	484	27	gate	gate	NOUN
fuelectenerg-900	484	28	voltage	voltage	NOUN
fuelectenerg-900	484	29	changes	change	NOUN
fuelectenerg-900	484	30	from	from	ADP
fuelectenerg-900	484	31	0	0	NUM
fuelectenerg-900	484	32	v	v	NOUN
fuelectenerg-900	484	33	to	to	ADP
fuelectenerg-900	484	34	7v	7v	NOUN
fuelectenerg-900	484	35	[	[	X
fuelectenerg-900	484	36	105	105	NUM
fuelectenerg-900	484	37	]	]	PUNCT
fuelectenerg-900	484	38	.	.	PUNCT
fuelectenerg-900	485	1	the	the	DET
fuelectenerg-900	485	2	resonance	resonance	NOUN
fuelectenerg-900	485	3	frequency	frequency	NOUN
fuelectenerg-900	485	4	tunability	tunability	NOUN
fuelectenerg-900	485	5	as	as	ADV
fuelectenerg-900	485	6	high	high	ADJ
fuelectenerg-900	485	7	as	as	ADP
fuelectenerg-900	485	8	400	400	NUM
fuelectenerg-900	485	9	%	%	NOUN
fuelectenerg-900	485	10	is	be	AUX
fuelectenerg-900	485	11	reached	reach	VERB
fuelectenerg-900	485	12	[	[	X
fuelectenerg-900	485	13	105	105	NUM
fuelectenerg-900	485	14	]	]	PUNCT
fuelectenerg-900	485	15	.	.	PUNCT
fuelectenerg-900	486	1	tensile	tensile	NOUN
fuelectenerg-900	486	2	strain	strain	NOUN
fuelectenerg-900	486	3	does	do	AUX
fuelectenerg-900	486	4	not	not	PART
fuelectenerg-900	486	5	only	only	ADV
fuelectenerg-900	486	6	increase	increase	VERB
fuelectenerg-900	486	7	the	the	DET
fuelectenerg-900	486	8	resonance	resonance	NOUN
fuelectenerg-900	486	9	frequency	frequency	NOUN
fuelectenerg-900	486	10	but	but	CCONJ
fuelectenerg-900	486	11	can	can	AUX
fuelectenerg-900	486	12	also	also	ADV
fuelectenerg-900	486	13	significantly	significantly	ADV
fuelectenerg-900	486	14	reduce	reduce	VERB
fuelectenerg-900	486	15	dissipation	dissipation	NOUN
fuelectenerg-900	486	16	(	(	PUNCT
fuelectenerg-900	486	17	i.e.	i.e.	X
fuelectenerg-900	486	18	increase	increase	VERB
fuelectenerg-900	486	19	the	the	DET
fuelectenerg-900	486	20	q	q	NOUN
fuelectenerg-900	486	21	factor	factor	NOUN
fuelectenerg-900	486	22	)	)	PUNCT
fuelectenerg-900	487	1	[	[	X
fuelectenerg-900	487	2	98	98	NUM
fuelectenerg-900	487	3	]	]	PUNCT
fuelectenerg-900	487	4	.	.	PUNCT
fuelectenerg-900	488	1	the	the	DET
fuelectenerg-900	488	2	increase	increase	NOUN
fuelectenerg-900	488	3	of	of	ADP
fuelectenerg-900	488	4	q	q	NOUN
fuelectenerg-900	488	5	with	with	SCONJ
fuelectenerg-900	488	6	the	the	DET
fuelectenerg-900	488	7	tensile	tensile	NOUN
fuelectenerg-900	488	8	strain	strain	NOUN
fuelectenerg-900	488	9	is	be	AUX
fuelectenerg-900	488	10	also	also	ADV
fuelectenerg-900	488	11	observed	observe	VERB
fuelectenerg-900	488	12	in	in	ADP
fuelectenerg-900	488	13	si	si	NOUN
fuelectenerg-900	488	14	,	,	PUNCT
fuelectenerg-900	488	15	sin	sin	NOUN
fuelectenerg-900	488	16	and	and	CCONJ
fuelectenerg-900	488	17	gaas	gaas	NOUN
fuelectenerg-900	488	18	nems	nem	NOUN
fuelectenerg-900	488	19	resonators	resonator	VERB
fuelectenerg-900	488	20	[	[	X
fuelectenerg-900	488	21	98	98	NUM
fuelectenerg-900	488	22	]	]	PUNCT
fuelectenerg-900	488	23	.	.	PUNCT
fuelectenerg-900	489	1	368	368	NUM
fuelectenerg-900	489	2	i.	i.	PROPN
fuelectenerg-900	489	3	jokić	jokić	PROPN
fuelectenerg-900	489	4	,	,	PUNCT
fuelectenerg-900	489	5	m.	m.	NOUN
fuelectenerg-900	489	6	frantlović	frantlović	NOUN
fuelectenerg-900	489	7	,	,	PUNCT
fuelectenerg-900	489	8	z.	z.	PROPN
fuelectenerg-900	489	9	djurić	djurić	PROPN
fuelectenerg-900	489	10	,	,	PUNCT
fuelectenerg-900	489	11	m.	m.	NOUN
fuelectenerg-900	489	12	l.	l.	PROPN
fuelectenerg-900	489	13	dukić	dukić	PROPN
fuelectenerg-900	489	14	in	in	ADP
fuelectenerg-900	489	15	ref	ref	NOUN
fuelectenerg-900	489	16	.	.	PUNCT
fuelectenerg-900	490	1	[	[	X
fuelectenerg-900	490	2	68	68	NUM
fuelectenerg-900	490	3	]	]	PUNCT
fuelectenerg-900	490	4	,	,	PUNCT
fuelectenerg-900	490	5	oscillators	oscillator	NOUN
fuelectenerg-900	490	6	containing	contain	VERB
fuelectenerg-900	490	7	a	a	DET
fuelectenerg-900	490	8	graphene	graphene	NOUN
fuelectenerg-900	490	9	nems	nem	NOUN
fuelectenerg-900	490	10	resonator	resonator	NOUN
fuelectenerg-900	490	11	are	be	AUX
fuelectenerg-900	490	12	reported	report	VERB
fuelectenerg-900	490	13	,	,	PUNCT
fuelectenerg-900	490	14	whose	whose	DET
fuelectenerg-900	490	15	frequency	frequency	NOUN
fuelectenerg-900	490	16	can	can	AUX
fuelectenerg-900	490	17	be	be	AUX
fuelectenerg-900	490	18	electrostatically	electrostatically	ADV
fuelectenerg-900	490	19	tuned	tune	VERB
fuelectenerg-900	490	20	by	by	ADP
fuelectenerg-900	490	21	as	as	ADV
fuelectenerg-900	490	22	much	much	ADJ
fuelectenerg-900	490	23	as	as	ADP
fuelectenerg-900	490	24	14	14	NUM
fuelectenerg-900	490	25	%	%	NOUN
fuelectenerg-900	490	26	.	.	PUNCT
fuelectenerg-900	491	1	self	self	NOUN
fuelectenerg-900	491	2	-	-	PUNCT
fuelectenerg-900	491	3	sustaining	sustain	VERB
fuelectenerg-900	491	4	mechanical	mechanical	ADJ
fuelectenerg-900	491	5	vibrations	vibration	NOUN
fuelectenerg-900	491	6	are	be	AUX
fuelectenerg-900	491	7	generated	generate	VERB
fuelectenerg-900	491	8	and	and	CCONJ
fuelectenerg-900	491	9	transduced	transduce	VERB
fuelectenerg-900	491	10	at	at	ADP
fuelectenerg-900	491	11	the	the	DET
fuelectenerg-900	491	12	room	room	NOUN
fuelectenerg-900	491	13	temperature	temperature	NOUN
fuelectenerg-900	491	14	using	use	VERB
fuelectenerg-900	491	15	simple	simple	ADJ
fuelectenerg-900	491	16	electrical	electrical	ADJ
fuelectenerg-900	491	17	circuitry	circuitry	NOUN
fuelectenerg-900	491	18	.	.	PUNCT
fuelectenerg-900	492	1	the	the	DET
fuelectenerg-900	492	2	52.2	52.2	NUM
fuelectenerg-900	492	3	mhz	mhz	NOUN
fuelectenerg-900	492	4	nems	nem	NOUN
fuelectenerg-900	492	5	oscillator	oscillator	NOUN
fuelectenerg-900	492	6	based	base	VERB
fuelectenerg-900	492	7	on	on	ADP
fuelectenerg-900	492	8	a	a	DET
fuelectenerg-900	492	9	graphene	graphene	ADJ
fuelectenerg-900	492	10	circular	circular	ADJ
fuelectenerg-900	492	11	drum	drum	NOUN
fuelectenerg-900	492	12	(	(	PUNCT
fuelectenerg-900	492	13	4	4	NUM
fuelectenerg-900	492	14	m	m	PROPN
fuelectenerg-900	492	15	in	in	ADP
fuelectenerg-900	492	16	diameter	diameter	NOUN
fuelectenerg-900	492	17	)	)	PUNCT
fuelectenerg-900	492	18	has	have	VERB
fuelectenerg-900	492	19	q=4015	q=4015	PROPN
fuelectenerg-900	492	20	at	at	ADP
fuelectenerg-900	492	21	the	the	DET
fuelectenerg-900	492	22	room	room	NOUN
fuelectenerg-900	492	23	temperature	temperature	NOUN
fuelectenerg-900	492	24	.	.	PUNCT
fuelectenerg-900	493	1	the	the	DET
fuelectenerg-900	493	2	graphene	graphene	PROPN
fuelectenerg-900	493	3	vco	vco	PROPN
fuelectenerg-900	493	4	,	,	PUNCT
fuelectenerg-900	493	5	which	which	PRON
fuelectenerg-900	493	6	is	be	AUX
fuelectenerg-900	493	7	the	the	DET
fuelectenerg-900	493	8	first	first	ADJ
fuelectenerg-900	493	9	prototype	prototype	NOUN
fuelectenerg-900	493	10	device	device	NOUN
fuelectenerg-900	493	11	for	for	ADP
fuelectenerg-900	493	12	rf	rf	NOUN
fuelectenerg-900	493	13	applications	application	NOUN
fuelectenerg-900	493	14	based	base	VERB
fuelectenerg-900	493	15	on	on	ADP
fuelectenerg-900	493	16	graphene	graphene	ADJ
fuelectenerg-900	493	17	nems	nem	NOUN
fuelectenerg-900	493	18	,	,	PUNCT
fuelectenerg-900	493	19	presented	present	VERB
fuelectenerg-900	493	20	in	in	ADP
fuelectenerg-900	493	21	the	the	DET
fuelectenerg-900	493	22	same	same	ADJ
fuelectenerg-900	493	23	reference	reference	NOUN
fuelectenerg-900	493	24	,	,	PUNCT
fuelectenerg-900	493	25	shows	show	VERB
fuelectenerg-900	493	26	promising	promise	VERB
fuelectenerg-900	493	27	performance	performance	NOUN
fuelectenerg-900	493	28	.	.	PUNCT
fuelectenerg-900	494	1	also	also	ADV
fuelectenerg-900	494	2	,	,	PUNCT
fuelectenerg-900	494	3	in	in	ADP
fuelectenerg-900	494	4	[	[	PUNCT
fuelectenerg-900	494	5	68	68	NUM
fuelectenerg-900	494	6	]	]	X
fuelectenerg-900	494	7	experimental	experimental	ADJ
fuelectenerg-900	494	8	data	datum	NOUN
fuelectenerg-900	494	9	pertinent	pertinent	VERB
fuelectenerg-900	494	10	to	to	PART
fuelectenerg-900	494	11	phase	phase	NOUN
fuelectenerg-900	494	12	noise	noise	NOUN
fuelectenerg-900	494	13	of	of	ADP
fuelectenerg-900	494	14	graphene	graphene	NOUN
fuelectenerg-900	494	15	oscillators	oscillator	NOUN
fuelectenerg-900	494	16	were	be	AUX
fuelectenerg-900	494	17	presented	present	VERB
fuelectenerg-900	494	18	for	for	ADP
fuelectenerg-900	494	19	the	the	DET
fuelectenerg-900	494	20	first	first	ADJ
fuelectenerg-900	494	21	time	time	NOUN
fuelectenerg-900	494	22	.	.	PUNCT
fuelectenerg-900	495	1	graphene	graphene	NOUN
fuelectenerg-900	495	2	resonators	resonator	NOUN
fuelectenerg-900	495	3	have	have	VERB
fuelectenerg-900	495	4	more	more	ADV
fuelectenerg-900	495	5	reproducible	reproducible	ADJ
fuelectenerg-900	495	6	characteristics	characteristic	NOUN
fuelectenerg-900	495	7	than	than	SCONJ
fuelectenerg-900	495	8	nts	nt	NOUN
fuelectenerg-900	495	9	.	.	PUNCT
fuelectenerg-900	495	10	signal	signal	PROPN
fuelectenerg-900	495	11	levels	level	NOUN
fuelectenerg-900	495	12	in	in	ADP
fuelectenerg-900	495	13	graphene	graphene	ADJ
fuelectenerg-900	495	14	resonators	resonator	NOUN
fuelectenerg-900	495	15	are	be	AUX
fuelectenerg-900	495	16	improved	improve	VERB
fuelectenerg-900	495	17	compared	compare	VERB
fuelectenerg-900	495	18	to	to	ADP
fuelectenerg-900	495	19	those	those	PRON
fuelectenerg-900	495	20	in	in	ADP
fuelectenerg-900	495	21	nt	nt	ADP
fuelectenerg-900	495	22	resonators	resonator	NOUN
fuelectenerg-900	495	23	,	,	PUNCT
fuelectenerg-900	495	24	due	due	ADP
fuelectenerg-900	495	25	to	to	ADP
fuelectenerg-900	495	26	the	the	DET
fuelectenerg-900	495	27	ability	ability	NOUN
fuelectenerg-900	495	28	to	to	PART
fuelectenerg-900	495	29	fabricate	fabricate	VERB
fuelectenerg-900	495	30	micrometer	micrometer	NOUN
fuelectenerg-900	495	31	-	-	PUNCT
fuelectenerg-900	495	32	wide	wide	ADJ
fuelectenerg-900	495	33	structures	structure	NOUN
fuelectenerg-900	495	34	with	with	ADP
fuelectenerg-900	495	35	higher	high	ADJ
fuelectenerg-900	495	36	conductance	conductance	NOUN
fuelectenerg-900	495	37	than	than	ADP
fuelectenerg-900	495	38	that	that	PRON
fuelectenerg-900	495	39	of	of	ADP
fuelectenerg-900	495	40	onedimensional	onedimensional	ADJ
fuelectenerg-900	495	41	nanotubes	nanotube	NOUN
fuelectenerg-900	495	42	[	[	X
fuelectenerg-900	495	43	105	105	NUM
fuelectenerg-900	495	44	]	]	PUNCT
fuelectenerg-900	495	45	.	.	PUNCT
fuelectenerg-900	496	1	by	by	ADP
fuelectenerg-900	496	2	exposing	expose	VERB
fuelectenerg-900	496	3	a	a	DET
fuelectenerg-900	496	4	micrometer	micrometer	NOUN
fuelectenerg-900	496	5	-	-	PUNCT
fuelectenerg-900	496	6	scale	scale	NOUN
fuelectenerg-900	496	7	graphene	graphene	NOUN
fuelectenerg-900	496	8	resonator	resonator	NOUN
fuelectenerg-900	496	9	to	to	PART
fuelectenerg-900	496	10	strain	strain	VERB
fuelectenerg-900	496	11	,	,	PUNCT
fuelectenerg-900	496	12	an	an	DET
fuelectenerg-900	496	13	increase	increase	NOUN
fuelectenerg-900	496	14	in	in	ADP
fuelectenerg-900	496	15	the	the	DET
fuelectenerg-900	496	16	resonance	resonance	NOUN
fuelectenerg-900	496	17	frequency	frequency	NOUN
fuelectenerg-900	496	18	(	(	PUNCT
fuelectenerg-900	496	19	in	in	ADP
fuelectenerg-900	496	20	ghz	ghz	NOUN
fuelectenerg-900	496	21	range	range	NOUN
fuelectenerg-900	496	22	)	)	PUNCT
fuelectenerg-900	496	23	can	can	AUX
fuelectenerg-900	496	24	be	be	AUX
fuelectenerg-900	496	25	achieved	achieve	VERB
fuelectenerg-900	496	26	without	without	ADP
fuelectenerg-900	496	27	a	a	DET
fuelectenerg-900	496	28	decrease	decrease	NOUN
fuelectenerg-900	496	29	in	in	ADP
fuelectenerg-900	496	30	the	the	DET
fuelectenerg-900	496	31	signal	signal	ADJ
fuelectenerg-900	496	32	level	level	NOUN
fuelectenerg-900	496	33	,	,	PUNCT
fuelectenerg-900	496	34	and	and	CCONJ
fuelectenerg-900	496	35	the	the	DET
fuelectenerg-900	496	36	dynamic	dynamic	ADJ
fuelectenerg-900	496	37	range	range	NOUN
fuelectenerg-900	496	38	also	also	ADV
fuelectenerg-900	496	39	increases	increase	VERB
fuelectenerg-900	496	40	with	with	ADP
fuelectenerg-900	496	41	the	the	DET
fuelectenerg-900	496	42	strain	strain	NOUN
fuelectenerg-900	496	43	(	(	PUNCT
fuelectenerg-900	496	44	since	since	SCONJ
fuelectenerg-900	496	45	the	the	DET
fuelectenerg-900	496	46	amplitude	amplitude	NOUN
fuelectenerg-900	496	47	at	at	ADP
fuelectenerg-900	496	48	the	the	DET
fuelectenerg-900	496	49	onset	onset	NOUN
fuelectenerg-900	496	50	of	of	ADP
fuelectenerg-900	496	51	nonlinearity	nonlinearity	NOUN
fuelectenerg-900	496	52	increases	increase	NOUN
fuelectenerg-900	496	53	with	with	ADP
fuelectenerg-900	496	54	strain	strain	NOUN
fuelectenerg-900	496	55	)	)	PUNCT
fuelectenerg-900	496	56	.	.	PUNCT
fuelectenerg-900	497	1	this	this	PRON
fuelectenerg-900	497	2	is	be	AUX
fuelectenerg-900	497	3	an	an	DET
fuelectenerg-900	497	4	advantage	advantage	NOUN
fuelectenerg-900	497	5	compared	compare	VERB
fuelectenerg-900	497	6	to	to	ADP
fuelectenerg-900	497	7	top	top	ADJ
fuelectenerg-900	497	8	-	-	PUNCT
fuelectenerg-900	497	9	down	down	ADP
fuelectenerg-900	497	10	nems	nem	NOUN
fuelectenerg-900	497	11	in	in	ADP
fuelectenerg-900	497	12	which	which	PRON
fuelectenerg-900	497	13	high	high	ADJ
fuelectenerg-900	497	14	resonance	resonance	NOUN
fuelectenerg-900	497	15	frequencies	frequency	NOUN
fuelectenerg-900	497	16	are	be	AUX
fuelectenerg-900	497	17	achieved	achieve	VERB
fuelectenerg-900	497	18	by	by	ADP
fuelectenerg-900	497	19	reducing	reduce	VERB
fuelectenerg-900	497	20	the	the	DET
fuelectenerg-900	497	21	resonator	resonator	NOUN
fuelectenerg-900	497	22	dimensions	dimension	NOUN
fuelectenerg-900	497	23	,	,	PUNCT
fuelectenerg-900	497	24	which	which	PRON
fuelectenerg-900	497	25	in	in	ADP
fuelectenerg-900	497	26	turn	turn	NOUN
fuelectenerg-900	497	27	causes	cause	VERB
fuelectenerg-900	497	28	a	a	DET
fuelectenerg-900	497	29	decrease	decrease	NOUN
fuelectenerg-900	497	30	of	of	ADP
fuelectenerg-900	497	31	both	both	CCONJ
fuelectenerg-900	497	32	the	the	DET
fuelectenerg-900	497	33	output	output	NOUN
fuelectenerg-900	497	34	signal	signal	NOUN
fuelectenerg-900	497	35	magnitude	magnitude	NOUN
fuelectenerg-900	497	36	and	and	CCONJ
fuelectenerg-900	497	37	the	the	DET
fuelectenerg-900	497	38	amplitude	amplitude	NOUN
fuelectenerg-900	497	39	at	at	ADP
fuelectenerg-900	497	40	the	the	DET
fuelectenerg-900	497	41	onset	onset	NOUN
fuelectenerg-900	497	42	of	of	ADP
fuelectenerg-900	497	43	nonlinearity	nonlinearity	NOUN
fuelectenerg-900	497	44	,	,	PUNCT
fuelectenerg-900	497	45	also	also	ADV
fuelectenerg-900	497	46	decreasing	decrease	VERB
fuelectenerg-900	497	47	the	the	DET
fuelectenerg-900	497	48	dynamic	dynamic	ADJ
fuelectenerg-900	497	49	range	range	NOUN
fuelectenerg-900	497	50	and	and	CCONJ
fuelectenerg-900	497	51	making	make	VERB
fuelectenerg-900	497	52	ghz	ghz	NOUN
fuelectenerg-900	497	53	-	-	PUNCT
fuelectenerg-900	497	54	range	range	NOUN
fuelectenerg-900	497	55	transduction	transduction	NOUN
fuelectenerg-900	497	56	difficult	difficult	ADJ
fuelectenerg-900	497	57	[	[	X
fuelectenerg-900	497	58	105	105	NUM
fuelectenerg-900	497	59	]	]	PUNCT
fuelectenerg-900	497	60	.	.	PUNCT
fuelectenerg-900	498	1	in	in	ADP
fuelectenerg-900	498	2	spite	spite	NOUN
fuelectenerg-900	498	3	of	of	ADP
fuelectenerg-900	498	4	the	the	DET
fuelectenerg-900	498	5	great	great	ADJ
fuelectenerg-900	498	6	potential	potential	NOUN
fuelectenerg-900	498	7	of	of	ADP
fuelectenerg-900	498	8	carbon	carbon	NOUN
fuelectenerg-900	498	9	nanotubes	nanotube	NOUN
fuelectenerg-900	498	10	and	and	CCONJ
fuelectenerg-900	498	11	graphene	graphene	VERB
fuelectenerg-900	498	12	in	in	ADP
fuelectenerg-900	498	13	resonator	resonator	NOUN
fuelectenerg-900	498	14	applications	application	NOUN
fuelectenerg-900	498	15	due	due	ADP
fuelectenerg-900	498	16	to	to	ADP
fuelectenerg-900	498	17	their	their	PRON
fuelectenerg-900	498	18	extraordinary	extraordinary	ADJ
fuelectenerg-900	498	19	mechanical	mechanical	ADJ
fuelectenerg-900	498	20	properties	property	NOUN
fuelectenerg-900	498	21	(	(	PUNCT
fuelectenerg-900	498	22	enabling	enable	VERB
fuelectenerg-900	498	23	high	high	ADJ
fuelectenerg-900	498	24	resonance	resonance	NOUN
fuelectenerg-900	498	25	frequencies	frequency	NOUN
fuelectenerg-900	498	26	and	and	CCONJ
fuelectenerg-900	498	27	high	high	ADJ
fuelectenerg-900	498	28	tunability	tunability	NOUN
fuelectenerg-900	498	29	)	)	PUNCT
fuelectenerg-900	498	30	,	,	PUNCT
fuelectenerg-900	498	31	there	there	PRON
fuelectenerg-900	498	32	is	be	VERB
fuelectenerg-900	498	33	a	a	DET
fuelectenerg-900	498	34	number	number	NOUN
fuelectenerg-900	498	35	of	of	ADP
fuelectenerg-900	498	36	issues	issue	NOUN
fuelectenerg-900	498	37	that	that	PRON
fuelectenerg-900	498	38	need	need	VERB
fuelectenerg-900	498	39	to	to	PART
fuelectenerg-900	498	40	be	be	AUX
fuelectenerg-900	498	41	addressed	address	VERB
fuelectenerg-900	498	42	in	in	ADP
fuelectenerg-900	498	43	order	order	NOUN
fuelectenerg-900	498	44	to	to	PART
fuelectenerg-900	498	45	enable	enable	VERB
fuelectenerg-900	498	46	practical	practical	ADJ
fuelectenerg-900	498	47	applications	application	NOUN
fuelectenerg-900	498	48	.	.	PUNCT
fuelectenerg-900	499	1	for	for	ADP
fuelectenerg-900	499	2	example	example	NOUN
fuelectenerg-900	499	3	,	,	PUNCT
fuelectenerg-900	499	4	integration	integration	NOUN
fuelectenerg-900	499	5	of	of	ADP
fuelectenerg-900	499	6	cnts	cnt	NOUN
fuelectenerg-900	499	7	and	and	CCONJ
fuelectenerg-900	499	8	control	control	NOUN
fuelectenerg-900	499	9	over	over	ADP
fuelectenerg-900	499	10	their	their	PRON
fuelectenerg-900	499	11	location	location	NOUN
fuelectenerg-900	499	12	on	on	ADP
fuelectenerg-900	499	13	-	-	PUNCT
fuelectenerg-900	499	14	chip	chip	NOUN
fuelectenerg-900	499	15	make	make	VERB
fuelectenerg-900	499	16	mass	mass	ADJ
fuelectenerg-900	499	17	production	production	NOUN
fuelectenerg-900	499	18	of	of	ADP
fuelectenerg-900	499	19	cnt	cnt	PROPN
fuelectenerg-900	499	20	-	-	PUNCT
fuelectenerg-900	499	21	based	base	VERB
fuelectenerg-900	499	22	nems	nem	NOUN
fuelectenerg-900	499	23	devices	device	NOUN
fuelectenerg-900	499	24	difficult	difficult	ADJ
fuelectenerg-900	499	25	to	to	PART
fuelectenerg-900	499	26	achieve	achieve	VERB
fuelectenerg-900	499	27	.	.	PUNCT
fuelectenerg-900	500	1	further	further	ADJ
fuelectenerg-900	500	2	research	research	NOUN
fuelectenerg-900	500	3	activities	activity	NOUN
fuelectenerg-900	500	4	aim	aim	VERB
fuelectenerg-900	500	5	to	to	PART
fuelectenerg-900	500	6	provide	provide	VERB
fuelectenerg-900	500	7	simpler	simple	ADJ
fuelectenerg-900	500	8	and	and	CCONJ
fuelectenerg-900	500	9	more	more	ADV
fuelectenerg-900	500	10	reproducible	reproducible	ADJ
fuelectenerg-900	500	11	techniques	technique	NOUN
fuelectenerg-900	500	12	for	for	ADP
fuelectenerg-900	500	13	fabrication	fabrication	NOUN
fuelectenerg-900	500	14	of	of	ADP
fuelectenerg-900	500	15	ultraclean	ultraclean	ADJ
fuelectenerg-900	500	16	nanotubes	nanotube	NOUN
fuelectenerg-900	500	17	,	,	PUNCT
fuelectenerg-900	500	18	and	and	CCONJ
fuelectenerg-900	500	19	exploration	exploration	NOUN
fuelectenerg-900	500	20	of	of	ADP
fuelectenerg-900	500	21	frequency	frequency	NOUN
fuelectenerg-900	500	22	tuning	tuning	NOUN
fuelectenerg-900	500	23	mechanisms	mechanism	NOUN
fuelectenerg-900	500	24	and	and	CCONJ
fuelectenerg-900	500	25	nanotube	nanotube	ADJ
fuelectenerg-900	500	26	nonlinear	nonlinear	ADJ
fuelectenerg-900	500	27	dynamics	dynamic	NOUN
fuelectenerg-900	500	28	.	.	PUNCT
fuelectenerg-900	501	1	the	the	DET
fuelectenerg-900	501	2	improvement	improvement	NOUN
fuelectenerg-900	501	3	of	of	ADP
fuelectenerg-900	501	4	quality	quality	NOUN
fuelectenerg-900	501	5	factors	factor	NOUN
fuelectenerg-900	501	6	of	of	ADP
fuelectenerg-900	501	7	both	both	DET
fuelectenerg-900	501	8	nanotube	nanotube	ADJ
fuelectenerg-900	501	9	and	and	CCONJ
fuelectenerg-900	501	10	graphene	graphene	NOUN
fuelectenerg-900	501	11	resonators	resonator	NOUN
fuelectenerg-900	501	12	is	be	AUX
fuelectenerg-900	501	13	an	an	DET
fuelectenerg-900	501	14	important	important	ADJ
fuelectenerg-900	501	15	task	task	NOUN
fuelectenerg-900	501	16	.	.	PUNCT
fuelectenerg-900	502	1	cnt	cnt	PROPN
fuelectenerg-900	502	2	and	and	CCONJ
fuelectenerg-900	502	3	graphene	graphene	VERB
fuelectenerg-900	502	4	structures	structure	NOUN
fuelectenerg-900	502	5	have	have	VERB
fuelectenerg-900	502	6	the	the	DET
fuelectenerg-900	502	7	largest	large	ADJ
fuelectenerg-900	502	8	surface	surface	NOUN
fuelectenerg-900	502	9	-	-	PUNCT
fuelectenerg-900	502	10	tovolume	tovolume	NOUN
fuelectenerg-900	502	11	ratios	ratio	NOUN
fuelectenerg-900	502	12	,	,	PUNCT
fuelectenerg-900	502	13	so	so	SCONJ
fuelectenerg-900	502	14	surface	surface	NOUN
fuelectenerg-900	502	15	effects	effect	NOUN
fuelectenerg-900	502	16	become	become	VERB
fuelectenerg-900	502	17	increasingly	increasingly	ADV
fuelectenerg-900	502	18	important	important	ADJ
fuelectenerg-900	502	19	to	to	PART
fuelectenerg-900	502	20	investigate	investigate	VERB
fuelectenerg-900	502	21	.	.	PUNCT
fuelectenerg-900	503	1	noise	noise	NOUN
fuelectenerg-900	503	2	generation	generation	NOUN
fuelectenerg-900	503	3	mechanisms	mechanism	NOUN
fuelectenerg-900	503	4	in	in	ADP
fuelectenerg-900	503	5	these	these	DET
fuelectenerg-900	503	6	structures	structure	NOUN
fuelectenerg-900	503	7	also	also	ADV
fuelectenerg-900	503	8	require	require	VERB
fuelectenerg-900	503	9	further	further	ADJ
fuelectenerg-900	503	10	investigation	investigation	NOUN
fuelectenerg-900	503	11	in	in	ADP
fuelectenerg-900	503	12	order	order	NOUN
fuelectenerg-900	503	13	for	for	SCONJ
fuelectenerg-900	503	14	their	their	PRON
fuelectenerg-900	503	15	ultimate	ultimate	ADJ
fuelectenerg-900	503	16	performances	performance	NOUN
fuelectenerg-900	503	17	to	to	PART
fuelectenerg-900	503	18	be	be	AUX
fuelectenerg-900	503	19	determined	determine	VERB
fuelectenerg-900	503	20	.	.	PUNCT
fuelectenerg-900	504	1	also	also	ADV
fuelectenerg-900	504	2	related	relate	VERB
fuelectenerg-900	504	3	to	to	ADP
fuelectenerg-900	504	4	the	the	DET
fuelectenerg-900	504	5	subject	subject	NOUN
fuelectenerg-900	504	6	of	of	ADP
fuelectenerg-900	504	7	this	this	DET
fuelectenerg-900	504	8	paper	paper	NOUN
fuelectenerg-900	504	9	are	be	AUX
fuelectenerg-900	504	10	adsorbed	adsorb	VERB
fuelectenerg-900	504	11	mass	mass	ADJ
fuelectenerg-900	504	12	fluctuations	fluctuation	NOUN
fuelectenerg-900	504	13	that	that	PRON
fuelectenerg-900	504	14	generate	generate	VERB
fuelectenerg-900	504	15	the	the	DET
fuelectenerg-900	504	16	adsorption	adsorption	NOUN
fuelectenerg-900	504	17	-	-	PUNCT
fuelectenerg-900	504	18	desorption	desorption	NOUN
fuelectenerg-900	504	19	phase	phase	NOUN
fuelectenerg-900	504	20	noise	noise	NOUN
fuelectenerg-900	504	21	of	of	ADP
fuelectenerg-900	504	22	resonators	resonator	NOUN
fuelectenerg-900	504	23	and	and	CCONJ
fuelectenerg-900	504	24	oscillators	oscillator	NOUN
fuelectenerg-900	504	25	.	.	PUNCT
fuelectenerg-900	505	1	the	the	DET
fuelectenerg-900	505	2	extremely	extremely	ADV
fuelectenerg-900	505	3	low	low	ADJ
fuelectenerg-900	505	4	mass	mass	NOUN
fuelectenerg-900	505	5	of	of	ADP
fuelectenerg-900	505	6	graphene	graphene	NOUN
fuelectenerg-900	505	7	structures	structure	NOUN
fuelectenerg-900	505	8	,	,	PUNCT
fuelectenerg-900	505	9	and	and	CCONJ
fuelectenerg-900	505	10	their	their	PRON
fuelectenerg-900	505	11	large	large	ADJ
fuelectenerg-900	505	12	surface	surface	NOUN
fuelectenerg-900	505	13	-	-	PUNCT
fuelectenerg-900	505	14	to	to	ADP
fuelectenerg-900	505	15	-	-	PUNCT
fuelectenerg-900	505	16	volume	volume	NOUN
fuelectenerg-900	505	17	ratio	ratio	NOUN
fuelectenerg-900	505	18	make	make	VERB
fuelectenerg-900	505	19	these	these	DET
fuelectenerg-900	505	20	resonators	resonator	NOUN
fuelectenerg-900	505	21	highly	highly	ADV
fuelectenerg-900	505	22	sensitive	sensitive	ADJ
fuelectenerg-900	505	23	to	to	ADP
fuelectenerg-900	505	24	added	add	VERB
fuelectenerg-900	505	25	mass	mass	PROPN
fuelectenerg-900	505	26	.	.	PUNCT
fuelectenerg-900	506	1	therefore	therefore	ADV
fuelectenerg-900	506	2	,	,	PUNCT
fuelectenerg-900	506	3	the	the	DET
fuelectenerg-900	506	4	properties	property	NOUN
fuelectenerg-900	506	5	of	of	ADP
fuelectenerg-900	506	6	such	such	ADJ
fuelectenerg-900	506	7	structures	structure	NOUN
fuelectenerg-900	506	8	are	be	AUX
fuelectenerg-900	506	9	highly	highly	ADV
fuelectenerg-900	506	10	sensitive	sensitive	ADJ
fuelectenerg-900	506	11	to	to	ADP
fuelectenerg-900	506	12	the	the	DET
fuelectenerg-900	506	13	amount	amount	NOUN
fuelectenerg-900	506	14	of	of	ADP
fuelectenerg-900	506	15	adsorbates	adsorbate	NOUN
fuelectenerg-900	506	16	and	and	CCONJ
fuelectenerg-900	506	17	its	its	PRON
fuelectenerg-900	506	18	change	change	NOUN
fuelectenerg-900	506	19	[	[	X
fuelectenerg-900	506	20	107	107	NUM
fuelectenerg-900	506	21	]	]	PUNCT
fuelectenerg-900	506	22	.	.	PUNCT
fuelectenerg-900	507	1	due	due	ADP
fuelectenerg-900	507	2	to	to	ADP
fuelectenerg-900	507	3	the	the	DET
fuelectenerg-900	507	4	high	high	ADJ
fuelectenerg-900	507	5	sensitivity	sensitivity	NOUN
fuelectenerg-900	507	6	to	to	ADP
fuelectenerg-900	507	7	mass	mass	ADJ
fuelectenerg-900	507	8	,	,	PUNCT
fuelectenerg-900	507	9	stochastic	stochastic	ADJ
fuelectenerg-900	507	10	adsorbed	adsorb	VERB
fuelectenerg-900	507	11	mass	mass	NOUN
fuelectenerg-900	507	12	fluctuations	fluctuation	NOUN
fuelectenerg-900	507	13	could	could	AUX
fuelectenerg-900	507	14	influence	influence	VERB
fuelectenerg-900	507	15	the	the	DET
fuelectenerg-900	507	16	fluctuations	fluctuation	NOUN
fuelectenerg-900	507	17	of	of	ADP
fuelectenerg-900	507	18	graphene	graphene	ADJ
fuelectenerg-900	507	19	resonator	resonator	NOUN
fuelectenerg-900	507	20	parameters	parameter	NOUN
fuelectenerg-900	507	21	,	,	PUNCT
fuelectenerg-900	507	22	i.e.	i.e.	X
fuelectenerg-900	507	23	the	the	DET
fuelectenerg-900	507	24	resonator	resonator	NOUN
fuelectenerg-900	507	25	total	total	NOUN
fuelectenerg-900	507	26	noise	noise	NOUN
fuelectenerg-900	507	27	.	.	PUNCT
fuelectenerg-900	508	1	there	there	PRON
fuelectenerg-900	508	2	is	be	VERB
fuelectenerg-900	508	3	not	not	PART
fuelectenerg-900	508	4	enough	enough	ADJ
fuelectenerg-900	508	5	data	datum	NOUN
fuelectenerg-900	508	6	in	in	ADP
fuelectenerg-900	508	7	the	the	DET
fuelectenerg-900	508	8	literature	literature	NOUN
fuelectenerg-900	508	9	about	about	ADP
fuelectenerg-900	508	10	the	the	DET
fuelectenerg-900	508	11	effects	effect	NOUN
fuelectenerg-900	508	12	of	of	ADP
fuelectenerg-900	508	13	gas	gas	NOUN
fuelectenerg-900	508	14	adsorption	adsorption	NOUN
fuelectenerg-900	508	15	on	on	ADP
fuelectenerg-900	508	16	mechanical	mechanical	ADJ
fuelectenerg-900	508	17	and	and	CCONJ
fuelectenerg-900	508	18	electrical	electrical	ADJ
fuelectenerg-900	508	19	parameters	parameter	NOUN
fuelectenerg-900	508	20	of	of	ADP
fuelectenerg-900	508	21	graphene	graphene	NOUN
fuelectenerg-900	508	22	resonators	resonator	NOUN
fuelectenerg-900	508	23	and	and	CCONJ
fuelectenerg-900	508	24	their	their	PRON
fuelectenerg-900	508	25	oscillation	oscillation	NOUN
fuelectenerg-900	508	26	,	,	PUNCT
fuelectenerg-900	508	27	and	and	CCONJ
fuelectenerg-900	508	28	therefore	therefore	ADV
fuelectenerg-900	508	29	this	this	DET
fuelectenerg-900	508	30	topic	topic	NOUN
fuelectenerg-900	508	31	requires	require	VERB
fuelectenerg-900	508	32	further	further	ADJ
fuelectenerg-900	508	33	investigation	investigation	NOUN
fuelectenerg-900	508	34	.	.	PUNCT
fuelectenerg-900	509	1	rf	rf	VERB
fuelectenerg-900	509	2	mems	mem	NOUN
fuelectenerg-900	509	3	/	/	SYM
fuelectenerg-900	509	4	nems	nem	NOUN
fuelectenerg-900	509	5	resonators	resonator	NOUN
fuelectenerg-900	509	6	for	for	ADP
fuelectenerg-900	509	7	wireless	wireless	ADJ
fuelectenerg-900	509	8	communication	communication	NOUN
fuelectenerg-900	509	9	systems	system	NOUN
fuelectenerg-900	509	10	and	and	CCONJ
fuelectenerg-900	509	11	adsorption	adsorption	NOUN
fuelectenerg-900	509	12	-	-	PUNCT
fuelectenerg-900	509	13	desorption	desorption	NOUN
fuelectenerg-900	509	14	phase	phase	NOUN
fuelectenerg-900	509	15	noise	noise	NOUN
fuelectenerg-900	509	16	369	369	NUM
fuelectenerg-900	509	17	3	3	NUM
fuelectenerg-900	509	18	.	.	NOUN
fuelectenerg-900	509	19	phase	phase	NOUN
fuelectenerg-900	509	20	noise	noise	NOUN
fuelectenerg-900	509	21	in	in	ADP
fuelectenerg-900	509	22	rf	rf	NOUN
fuelectenerg-900	509	23	mems	mem	NOUN
fuelectenerg-900	509	24	/	/	SYM
fuelectenerg-900	509	25	nems	nems	PROPN
fuelectenerg-900	509	26	operation	operation	NOUN
fuelectenerg-900	509	27	of	of	ADP
fuelectenerg-900	509	28	mems	mems	PROPN
fuelectenerg-900	509	29	and	and	CCONJ
fuelectenerg-900	509	30	nems	nem	NOUN
fuelectenerg-900	509	31	components	component	NOUN
fuelectenerg-900	509	32	(	(	PUNCT
fuelectenerg-900	509	33	including	include	VERB
fuelectenerg-900	509	34	rf	rf	NOUN
fuelectenerg-900	509	35	)	)	PUNCT
fuelectenerg-900	509	36	is	be	AUX
fuelectenerg-900	509	37	based	base	VERB
fuelectenerg-900	509	38	on	on	ADP
fuelectenerg-900	509	39	the	the	DET
fuelectenerg-900	509	40	interaction	interaction	NOUN
fuelectenerg-900	509	41	between	between	ADP
fuelectenerg-900	509	42	the	the	DET
fuelectenerg-900	509	43	mechanical	mechanical	ADJ
fuelectenerg-900	509	44	and	and	CCONJ
fuelectenerg-900	509	45	the	the	DET
fuelectenerg-900	509	46	electrical	electrical	ADJ
fuelectenerg-900	509	47	domain	domain	NOUN
fuelectenerg-900	509	48	of	of	ADP
fuelectenerg-900	509	49	the	the	DET
fuelectenerg-900	509	50	system	system	NOUN
fuelectenerg-900	509	51	.	.	PUNCT
fuelectenerg-900	510	1	thus	thus	ADV
fuelectenerg-900	510	2	,	,	PUNCT
fuelectenerg-900	510	3	apart	apart	ADV
fuelectenerg-900	510	4	from	from	ADP
fuelectenerg-900	510	5	the	the	DET
fuelectenerg-900	510	6	noises	noise	NOUN
fuelectenerg-900	510	7	inherent	inherent	ADJ
fuelectenerg-900	510	8	to	to	ADP
fuelectenerg-900	510	9	electrical	electrical	ADJ
fuelectenerg-900	510	10	and	and	CCONJ
fuelectenerg-900	510	11	electronic	electronic	ADJ
fuelectenerg-900	510	12	devices	device	NOUN
fuelectenerg-900	510	13	(	(	PUNCT
fuelectenerg-900	510	14	e.g.	e.g.	ADV
fuelectenerg-900	510	15	thermal	thermal	ADJ
fuelectenerg-900	510	16	(	(	PUNCT
fuelectenerg-900	510	17	johnson	johnson	PROPN
fuelectenerg-900	510	18	)	)	PUNCT
fuelectenerg-900	510	19	noise	noise	NOUN
fuelectenerg-900	510	20	,	,	PUNCT
fuelectenerg-900	510	21	shot	shot	NOUN
fuelectenerg-900	510	22	noise	noise	NOUN
fuelectenerg-900	510	23	,	,	PUNCT
fuelectenerg-900	510	24	generation	generation	NOUN
fuelectenerg-900	510	25	-	-	PUNCT
fuelectenerg-900	510	26	recombination	recombination	NOUN
fuelectenerg-900	510	27	(	(	PUNCT
fuelectenerg-900	510	28	gr	gr	NOUN
fuelectenerg-900	510	29	)	)	PUNCT
fuelectenerg-900	510	30	noise	noise	NOUN
fuelectenerg-900	510	31	,	,	PUNCT
fuelectenerg-900	510	32	1	1	NUM
fuelectenerg-900	510	33	/	/	SYM
fuelectenerg-900	510	34	f	f	PROPN
fuelectenerg-900	510	35	noise	noise	NOUN
fuelectenerg-900	510	36	)	)	PUNCT
fuelectenerg-900	510	37	,	,	PUNCT
fuelectenerg-900	510	38	generated	generate	VERB
fuelectenerg-900	510	39	in	in	ADP
fuelectenerg-900	510	40	em	em	PRON
fuelectenerg-900	510	41	transducer	transducer	NOUN
fuelectenerg-900	510	42	circuits	circuit	NOUN
fuelectenerg-900	510	43	,	,	PUNCT
fuelectenerg-900	510	44	amplifiers	amplifier	NOUN
fuelectenerg-900	510	45	and	and	CCONJ
fuelectenerg-900	510	46	other	other	ADJ
fuelectenerg-900	510	47	electronic	electronic	ADJ
fuelectenerg-900	510	48	parts	part	NOUN
fuelectenerg-900	510	49	of	of	ADP
fuelectenerg-900	510	50	mems	mem	NOUN
fuelectenerg-900	510	51	/	/	SYM
fuelectenerg-900	510	52	nems	nem	NOUN
fuelectenerg-900	510	53	systems	system	NOUN
fuelectenerg-900	510	54	,	,	PUNCT
fuelectenerg-900	510	55	noise	noise	VERB
fuelectenerg-900	510	56	analysis	analysis	NOUN
fuelectenerg-900	510	57	in	in	ADP
fuelectenerg-900	510	58	mems	mem	NOUN
fuelectenerg-900	510	59	/	/	SYM
fuelectenerg-900	510	60	nems	nem	NOUN
fuelectenerg-900	510	61	has	have	VERB
fuelectenerg-900	510	62	to	to	PART
fuelectenerg-900	510	63	include	include	VERB
fuelectenerg-900	510	64	noise	noise	NOUN
fuelectenerg-900	510	65	generating	generating	NOUN
fuelectenerg-900	510	66	mechanisms	mechanism	NOUN
fuelectenerg-900	510	67	in	in	ADP
fuelectenerg-900	510	68	the	the	DET
fuelectenerg-900	510	69	mechanical	mechanical	ADJ
fuelectenerg-900	510	70	domain	domain	NOUN
fuelectenerg-900	511	1	[	[	X
fuelectenerg-900	511	2	108	108	NUM
fuelectenerg-900	511	3	]	]	PUNCT
fuelectenerg-900	511	4	.	.	PUNCT
fuelectenerg-900	512	1	fundamental	fundamental	ADJ
fuelectenerg-900	512	2	(	(	PUNCT
fuelectenerg-900	512	3	internal	internal	ADJ
fuelectenerg-900	512	4	)	)	PUNCT
fuelectenerg-900	512	5	mechanical	mechanical	ADJ
fuelectenerg-900	512	6	noises	noise	NOUN
fuelectenerg-900	512	7	are	be	AUX
fuelectenerg-900	512	8	the	the	DET
fuelectenerg-900	512	9	consequence	consequence	NOUN
fuelectenerg-900	512	10	of	of	ADP
fuelectenerg-900	512	11	the	the	DET
fuelectenerg-900	512	12	stochastic	stochastic	ADJ
fuelectenerg-900	512	13	nature	nature	NOUN
fuelectenerg-900	512	14	of	of	ADP
fuelectenerg-900	512	15	physical	physical	ADJ
fuelectenerg-900	512	16	processes	process	NOUN
fuelectenerg-900	512	17	occurring	occur	VERB
fuelectenerg-900	512	18	inside	inside	ADP
fuelectenerg-900	512	19	the	the	DET
fuelectenerg-900	512	20	mems	mem	NOUN
fuelectenerg-900	512	21	/	/	SYM
fuelectenerg-900	512	22	nems	nems	PROPN
fuelectenerg-900	512	23	component	component	NOUN
fuelectenerg-900	512	24	or	or	CCONJ
fuelectenerg-900	512	25	at	at	ADP
fuelectenerg-900	512	26	the	the	DET
fuelectenerg-900	512	27	interface	interface	NOUN
fuelectenerg-900	512	28	between	between	ADP
fuelectenerg-900	512	29	the	the	DET
fuelectenerg-900	512	30	mechanical	mechanical	ADJ
fuelectenerg-900	512	31	structure	structure	NOUN
fuelectenerg-900	512	32	and	and	CCONJ
fuelectenerg-900	512	33	the	the	DET
fuelectenerg-900	512	34	environment	environment	NOUN
fuelectenerg-900	512	35	,	,	PUNCT
fuelectenerg-900	512	36	which	which	PRON
fuelectenerg-900	512	37	result	result	VERB
fuelectenerg-900	512	38	in	in	ADP
fuelectenerg-900	512	39	stochastic	stochastic	ADJ
fuelectenerg-900	512	40	fluctuations	fluctuation	NOUN
fuelectenerg-900	512	41	of	of	ADP
fuelectenerg-900	512	42	displacement	displacement	NOUN
fuelectenerg-900	512	43	of	of	ADP
fuelectenerg-900	512	44	a	a	DET
fuelectenerg-900	512	45	mechanical	mechanical	ADJ
fuelectenerg-900	512	46	structure	structure	NOUN
fuelectenerg-900	512	47	and/or	and/or	CCONJ
fuelectenerg-900	512	48	of	of	ADP
fuelectenerg-900	512	49	its	its	PRON
fuelectenerg-900	512	50	mechanical	mechanical	ADJ
fuelectenerg-900	512	51	resonance	resonance	NOUN
fuelectenerg-900	512	52	properties	property	NOUN
fuelectenerg-900	512	53	,	,	PUNCT
fuelectenerg-900	512	54	thus	thus	ADV
fuelectenerg-900	512	55	causing	cause	VERB
fuelectenerg-900	512	56	fluctuations	fluctuation	NOUN
fuelectenerg-900	512	57	of	of	ADP
fuelectenerg-900	512	58	the	the	DET
fuelectenerg-900	512	59	electrical	electrical	ADJ
fuelectenerg-900	512	60	output	output	NOUN
fuelectenerg-900	512	61	signal	signal	NOUN
fuelectenerg-900	512	62	.	.	PUNCT
fuelectenerg-900	513	1	characteristic	characteristic	ADJ
fuelectenerg-900	513	2	fundamental	fundamental	ADJ
fuelectenerg-900	513	3	mechanical	mechanical	ADJ
fuelectenerg-900	513	4	noises	noise	NOUN
fuelectenerg-900	513	5	of	of	ADP
fuelectenerg-900	513	6	mems	mem	NOUN
fuelectenerg-900	513	7	/	/	SYM
fuelectenerg-900	513	8	nems	nem	NOUN
fuelectenerg-900	513	9	resonators	resonator	NOUN
fuelectenerg-900	513	10	are	be	AUX
fuelectenerg-900	513	11	thermo	thermo	NOUN
fuelectenerg-900	513	12	-	-	PUNCT
fuelectenerg-900	513	13	mechanical	mechanical	ADJ
fuelectenerg-900	513	14	(	(	PUNCT
fuelectenerg-900	513	15	tm	tm	NOUN
fuelectenerg-900	513	16	)	)	PUNCT
fuelectenerg-900	513	17	noise	noise	NOUN
fuelectenerg-900	513	18	,	,	PUNCT
fuelectenerg-900	513	19	noise	noise	NOUN
fuelectenerg-900	513	20	due	due	ADP
fuelectenerg-900	513	21	to	to	ADP
fuelectenerg-900	513	22	temperature	temperature	NOUN
fuelectenerg-900	513	23	fluctuations	fluctuation	NOUN
fuelectenerg-900	513	24	(	(	PUNCT
fuelectenerg-900	513	25	tf	tf	NOUN
fuelectenerg-900	513	26	)	)	PUNCT
fuelectenerg-900	513	27	,	,	PUNCT
fuelectenerg-900	513	28	and	and	CCONJ
fuelectenerg-900	513	29	adsorption	adsorption	NOUN
fuelectenerg-900	513	30	-	-	PUNCT
fuelectenerg-900	513	31	desorption	desorption	NOUN
fuelectenerg-900	513	32	(	(	PUNCT
fuelectenerg-900	513	33	ad	ad	NOUN
fuelectenerg-900	513	34	)	)	PUNCT
fuelectenerg-900	513	35	noise	noise	NOUN
fuelectenerg-900	513	36	.	.	PUNCT
fuelectenerg-900	514	1	their	their	PRON
fuelectenerg-900	514	2	contribution	contribution	NOUN
fuelectenerg-900	514	3	to	to	ADP
fuelectenerg-900	514	4	the	the	DET
fuelectenerg-900	514	5	total	total	ADJ
fuelectenerg-900	514	6	noise	noise	NOUN
fuelectenerg-900	514	7	increases	increase	NOUN
fuelectenerg-900	514	8	and	and	CCONJ
fuelectenerg-900	514	9	may	may	AUX
fuelectenerg-900	514	10	become	become	VERB
fuelectenerg-900	514	11	dominant	dominant	ADJ
fuelectenerg-900	514	12	as	as	ADP
fuelectenerg-900	514	13	the	the	DET
fuelectenerg-900	514	14	dimensions	dimension	NOUN
fuelectenerg-900	514	15	,	,	PUNCT
fuelectenerg-900	514	16	mass	mass	NOUN
fuelectenerg-900	514	17	and	and	CCONJ
fuelectenerg-900	514	18	displacement	displacement	NOUN
fuelectenerg-900	514	19	of	of	ADP
fuelectenerg-900	514	20	mechanical	mechanical	ADJ
fuelectenerg-900	514	21	structures	structure	NOUN
fuelectenerg-900	514	22	decrease	decrease	VERB
fuelectenerg-900	514	23	.	.	PUNCT
fuelectenerg-900	515	1	the	the	DET
fuelectenerg-900	515	2	short	short	ADJ
fuelectenerg-900	515	3	-	-	PUNCT
fuelectenerg-900	515	4	term	term	NOUN
fuelectenerg-900	515	5	frequency	frequency	NOUN
fuelectenerg-900	515	6	stability	stability	NOUN
fuelectenerg-900	515	7	,	,	PUNCT
fuelectenerg-900	515	8	which	which	PRON
fuelectenerg-900	515	9	is	be	AUX
fuelectenerg-900	515	10	a	a	DET
fuelectenerg-900	515	11	significant	significant	ADJ
fuelectenerg-900	515	12	parameter	parameter	NOUN
fuelectenerg-900	515	13	of	of	ADP
fuelectenerg-900	515	14	mems	mem	NOUN
fuelectenerg-900	515	15	/	/	SYM
fuelectenerg-900	515	16	nems	nem	NOUN
fuelectenerg-900	515	17	resonators	resonator	NOUN
fuelectenerg-900	515	18	,	,	PUNCT
fuelectenerg-900	515	19	is	be	AUX
fuelectenerg-900	515	20	determined	determine	VERB
fuelectenerg-900	515	21	by	by	ADP
fuelectenerg-900	515	22	the	the	DET
fuelectenerg-900	515	23	phase	phase	NOUN
fuelectenerg-900	515	24	noise	noise	NOUN
fuelectenerg-900	515	25	.	.	PUNCT
fuelectenerg-900	516	1	the	the	DET
fuelectenerg-900	516	2	oscillator	oscillator	NOUN
fuelectenerg-900	516	3	phase	phase	NOUN
fuelectenerg-900	516	4	noise	noise	NOUN
fuelectenerg-900	516	5	,	,	PUNCT
fuelectenerg-900	516	6	that	that	PRON
fuelectenerg-900	516	7	degrades	degrade	VERB
fuelectenerg-900	516	8	the	the	DET
fuelectenerg-900	516	9	signal	signal	ADJ
fuelectenerg-900	516	10	transmission	transmission	NOUN
fuelectenerg-900	516	11	quality	quality	NOUN
fuelectenerg-900	516	12	,	,	PUNCT
fuelectenerg-900	516	13	originates	originate	NOUN
fuelectenerg-900	516	14	from	from	ADP
fuelectenerg-900	516	15	phase	phase	NOUN
fuelectenerg-900	516	16	fluctuations	fluctuation	NOUN
fuelectenerg-900	516	17	caused	cause	VERB
fuelectenerg-900	516	18	by	by	ADP
fuelectenerg-900	516	19	noise	noise	NOUN
fuelectenerg-900	516	20	generation	generation	NOUN
fuelectenerg-900	516	21	mechanisms	mechanism	NOUN
fuelectenerg-900	516	22	in	in	ADP
fuelectenerg-900	516	23	the	the	DET
fuelectenerg-900	516	24	oscillator	oscillator	NOUN
fuelectenerg-900	516	25	's	's	PART
fuelectenerg-900	516	26	electronic	electronic	ADJ
fuelectenerg-900	516	27	circuit	circuit	NOUN
fuelectenerg-900	516	28	and	and	CCONJ
fuelectenerg-900	516	29	also	also	ADV
fuelectenerg-900	516	30	from	from	ADP
fuelectenerg-900	516	31	the	the	DET
fuelectenerg-900	516	32	resonator	resonator	NOUN
fuelectenerg-900	516	33	noise	noise	NOUN
fuelectenerg-900	516	34	[	[	X
fuelectenerg-900	516	35	109	109	NUM
fuelectenerg-900	516	36	]	]	PUNCT
fuelectenerg-900	516	37	.	.	PUNCT
fuelectenerg-900	517	1	the	the	DET
fuelectenerg-900	517	2	fundamental	fundamental	ADJ
fuelectenerg-900	517	3	mechanical	mechanical	ADJ
fuelectenerg-900	517	4	noises	noise	NOUN
fuelectenerg-900	517	5	cause	cause	VERB
fuelectenerg-900	517	6	unavoidable	unavoidable	ADJ
fuelectenerg-900	517	7	stochastic	stochastic	ADJ
fuelectenerg-900	517	8	fluctuations	fluctuation	NOUN
fuelectenerg-900	517	9	of	of	ADP
fuelectenerg-900	517	10	the	the	DET
fuelectenerg-900	517	11	phase	phase	NOUN
fuelectenerg-900	517	12	and	and	CCONJ
fuelectenerg-900	517	13	frequency	frequency	NOUN
fuelectenerg-900	517	14	of	of	ADP
fuelectenerg-900	517	15	a	a	DET
fuelectenerg-900	517	16	resonant	resonant	ADJ
fuelectenerg-900	517	17	structure	structure	NOUN
fuelectenerg-900	517	18	oscillation	oscillation	NOUN
fuelectenerg-900	517	19	and	and	CCONJ
fuelectenerg-900	517	20	determine	determine	VERB
fuelectenerg-900	517	21	the	the	DET
fuelectenerg-900	517	22	lowest	low	ADJ
fuelectenerg-900	517	23	(	(	PUNCT
fuelectenerg-900	517	24	fundamental	fundamental	ADJ
fuelectenerg-900	517	25	)	)	PUNCT
fuelectenerg-900	517	26	limit	limit	NOUN
fuelectenerg-900	517	27	of	of	ADP
fuelectenerg-900	517	28	the	the	DET
fuelectenerg-900	517	29	mems	mem	NOUN
fuelectenerg-900	517	30	/	/	SYM
fuelectenerg-900	517	31	nems	nem	NOUN
fuelectenerg-900	517	32	resonator	resonator	NOUN
fuelectenerg-900	517	33	noise	noise	NOUN
fuelectenerg-900	517	34	.	.	PUNCT
fuelectenerg-900	518	1	therefore	therefore	ADV
fuelectenerg-900	518	2	,	,	PUNCT
fuelectenerg-900	518	3	tm	tm	PROPN
fuelectenerg-900	518	4	,	,	PUNCT
fuelectenerg-900	518	5	tf	tf	INTJ
fuelectenerg-900	518	6	and	and	CCONJ
fuelectenerg-900	518	7	ad	ad	NOUN
fuelectenerg-900	518	8	noise	noise	NOUN
fuelectenerg-900	518	9	are	be	AUX
fuelectenerg-900	518	10	considered	consider	VERB
fuelectenerg-900	518	11	as	as	ADP
fuelectenerg-900	518	12	a	a	DET
fuelectenerg-900	518	13	measure	measure	NOUN
fuelectenerg-900	518	14	of	of	ADP
fuelectenerg-900	518	15	the	the	DET
fuelectenerg-900	518	16	mems	mem	NOUN
fuelectenerg-900	518	17	/	/	SYM
fuelectenerg-900	518	18	nems	nem	NOUN
fuelectenerg-900	518	19	resonator	resonator	VERB
fuelectenerg-900	518	20	ultimate	ultimate	ADJ
fuelectenerg-900	518	21	performance	performance	NOUN
fuelectenerg-900	518	22	.	.	PUNCT
fuelectenerg-900	519	1	although	although	SCONJ
fuelectenerg-900	519	2	theoretical	theoretical	ADJ
fuelectenerg-900	519	3	considerations	consideration	NOUN
fuelectenerg-900	519	4	of	of	ADP
fuelectenerg-900	519	5	tm	tm	PROPN
fuelectenerg-900	519	6	,	,	PUNCT
fuelectenerg-900	519	7	tf	tf	INTJ
fuelectenerg-900	519	8	and	and	CCONJ
fuelectenerg-900	519	9	ad	ad	NOUN
fuelectenerg-900	519	10	noise	noise	NOUN
fuelectenerg-900	519	11	in	in	ADP
fuelectenerg-900	519	12	mems	mem	NOUN
fuelectenerg-900	519	13	/	/	SYM
fuelectenerg-900	519	14	nems	nem	NOUN
fuelectenerg-900	519	15	were	be	AUX
fuelectenerg-900	519	16	published	publish	VERB
fuelectenerg-900	519	17	in	in	ADP
fuelectenerg-900	519	18	the	the	DET
fuelectenerg-900	519	19	literature	literature	NOUN
fuelectenerg-900	519	20	[	[	X
fuelectenerg-900	519	21	108	108	NUM
fuelectenerg-900	519	22	,	,	PUNCT
fuelectenerg-900	519	23	110	110	NUM
fuelectenerg-900	519	24	-	-	SYM
fuelectenerg-900	519	25	114	114	NUM
fuelectenerg-900	519	26	]	]	PUNCT
fuelectenerg-900	519	27	,	,	PUNCT
fuelectenerg-900	519	28	a	a	DET
fuelectenerg-900	519	29	need	need	NOUN
fuelectenerg-900	519	30	for	for	ADP
fuelectenerg-900	519	31	more	more	ADJ
fuelectenerg-900	519	32	comprehensive	comprehensive	ADJ
fuelectenerg-900	519	33	models	model	NOUN
fuelectenerg-900	519	34	of	of	ADP
fuelectenerg-900	519	35	noise	noise	NOUN
fuelectenerg-900	519	36	in	in	ADP
fuelectenerg-900	519	37	mems	mem	NOUN
fuelectenerg-900	519	38	/	/	SYM
fuelectenerg-900	519	39	nems	nem	NOUN
fuelectenerg-900	519	40	resonators	resonator	NOUN
fuelectenerg-900	519	41	and	and	CCONJ
fuelectenerg-900	519	42	oscillators	oscillator	NOUN
fuelectenerg-900	519	43	still	still	ADV
fuelectenerg-900	519	44	exists	exist	VERB
fuelectenerg-900	519	45	.	.	PUNCT
fuelectenerg-900	520	1	further	far	ADV
fuelectenerg-900	520	2	in	in	ADP
fuelectenerg-900	520	3	this	this	DET
fuelectenerg-900	520	4	section	section	NOUN
fuelectenerg-900	520	5	,	,	PUNCT
fuelectenerg-900	520	6	theoretic	theoretic	NOUN
fuelectenerg-900	520	7	models	model	NOUN
fuelectenerg-900	520	8	of	of	ADP
fuelectenerg-900	520	9	ad	ad	NOUN
fuelectenerg-900	520	10	noise	noise	NOUN
fuelectenerg-900	520	11	in	in	ADP
fuelectenerg-900	520	12	rf	rf	NOUN
fuelectenerg-900	520	13	mems	mem	NOUN
fuelectenerg-900	520	14	/	/	SYM
fuelectenerg-900	520	15	nems	nem	NOUN
fuelectenerg-900	520	16	em	em	PRON
fuelectenerg-900	520	17	resonators	resonator	NOUN
fuelectenerg-900	520	18	and	and	CCONJ
fuelectenerg-900	520	19	of	of	ADP
fuelectenerg-900	520	20	phase	phase	NOUN
fuelectenerg-900	520	21	noise	noise	NOUN
fuelectenerg-900	520	22	in	in	ADP
fuelectenerg-900	520	23	mems	mem	NOUN
fuelectenerg-900	520	24	/	/	SYM
fuelectenerg-900	520	25	nems	nems	PROPN
fuelectenerg-900	520	26	oscillators	oscillator	NOUN
fuelectenerg-900	520	27	,	,	PUNCT
fuelectenerg-900	520	28	presented	present	VERB
fuelectenerg-900	520	29	in	in	ADP
fuelectenerg-900	520	30	our	our	PRON
fuelectenerg-900	520	31	papers	paper	NOUN
fuelectenerg-900	520	32	[	[	X
fuelectenerg-900	520	33	113	113	NUM
fuelectenerg-900	520	34	,	,	PUNCT
fuelectenerg-900	520	35	115	115	NUM
fuelectenerg-900	520	36	-	-	SYM
fuelectenerg-900	520	37	123	123	NUM
fuelectenerg-900	520	38	]	]	PUNCT
fuelectenerg-900	520	39	,	,	PUNCT
fuelectenerg-900	520	40	will	will	AUX
fuelectenerg-900	520	41	be	be	AUX
fuelectenerg-900	520	42	briefly	briefly	ADV
fuelectenerg-900	520	43	reviewed	review	VERB
fuelectenerg-900	520	44	,	,	PUNCT
fuelectenerg-900	520	45	and	and	CCONJ
fuelectenerg-900	520	46	then	then	ADV
fuelectenerg-900	520	47	the	the	DET
fuelectenerg-900	520	48	results	result	NOUN
fuelectenerg-900	520	49	of	of	ADP
fuelectenerg-900	520	50	the	the	DET
fuelectenerg-900	520	51	quantitative	quantitative	ADJ
fuelectenerg-900	520	52	analysis	analysis	NOUN
fuelectenerg-900	520	53	will	will	AUX
fuelectenerg-900	520	54	be	be	AUX
fuelectenerg-900	520	55	given	give	VERB
fuelectenerg-900	520	56	.	.	PUNCT
fuelectenerg-900	521	1	3.1	3.1	NUM
fuelectenerg-900	521	2	.	.	PUNCT
fuelectenerg-900	521	3	adsorption	adsorption	NOUN
fuelectenerg-900	521	4	-	-	PUNCT
fuelectenerg-900	521	5	desorption	desorption	NOUN
fuelectenerg-900	521	6	noise	noise	NOUN
fuelectenerg-900	521	7	in	in	ADP
fuelectenerg-900	521	8	mems	mem	NOUN
fuelectenerg-900	521	9	/	/	SYM
fuelectenerg-900	521	10	nems	nem	NOUN
fuelectenerg-900	521	11	resonators	resonator	NOUN
fuelectenerg-900	521	12	in	in	ADP
fuelectenerg-900	521	13	mechanical	mechanical	ADJ
fuelectenerg-900	521	14	structures	structure	NOUN
fuelectenerg-900	521	15	of	of	ADP
fuelectenerg-900	521	16	micrometer	micrometer	NOUN
fuelectenerg-900	521	17	or	or	CCONJ
fuelectenerg-900	521	18	sub	sub	ADJ
fuelectenerg-900	521	19	-	-	ADJ
fuelectenerg-900	521	20	micrometer	micrometer	NOUN
fuelectenerg-900	521	21	dimensions	dimension	NOUN
fuelectenerg-900	521	22	and	and	CCONJ
fuelectenerg-900	521	23	minuscule	minuscule	ADJ
fuelectenerg-900	521	24	mass	mass	PROPN
fuelectenerg-900	521	25	,	,	PUNCT
fuelectenerg-900	521	26	whose	whose	DET
fuelectenerg-900	521	27	displacement	displacement	NOUN
fuelectenerg-900	521	28	is	be	AUX
fuelectenerg-900	521	29	in	in	ADP
fuelectenerg-900	521	30	nanometer	nanometer	NOUN
fuelectenerg-900	521	31	range	range	NOUN
fuelectenerg-900	521	32	,	,	PUNCT
fuelectenerg-900	521	33	the	the	DET
fuelectenerg-900	521	34	effects	effect	NOUN
fuelectenerg-900	521	35	of	of	ADP
fuelectenerg-900	521	36	physical	physical	ADJ
fuelectenerg-900	521	37	phenomena	phenomenon	NOUN
fuelectenerg-900	521	38	that	that	PRON
fuelectenerg-900	521	39	are	be	AUX
fuelectenerg-900	521	40	negligible	negligible	ADJ
fuelectenerg-900	521	41	in	in	ADP
fuelectenerg-900	521	42	the	the	DET
fuelectenerg-900	521	43	macroscopic	macroscopic	ADJ
fuelectenerg-900	521	44	world	world	NOUN
fuelectenerg-900	521	45	become	become	VERB
fuelectenerg-900	521	46	significant	significant	ADJ
fuelectenerg-900	521	47	.	.	PUNCT
fuelectenerg-900	522	1	among	among	ADP
fuelectenerg-900	522	2	such	such	ADJ
fuelectenerg-900	522	3	phenomena	phenomenon	NOUN
fuelectenerg-900	522	4	are	be	AUX
fuelectenerg-900	522	5	adsorption	adsorption	NOUN
fuelectenerg-900	522	6	and	and	CCONJ
fuelectenerg-900	522	7	desorption	desorption	NOUN
fuelectenerg-900	522	8	of	of	ADP
fuelectenerg-900	522	9	surrounding	surround	VERB
fuelectenerg-900	522	10	gases	gas	NOUN
fuelectenerg-900	522	11	,	,	PUNCT
fuelectenerg-900	522	12	that	that	PRON
fuelectenerg-900	522	13	spontaneously	spontaneously	ADV
fuelectenerg-900	522	14	and	and	CCONJ
fuelectenerg-900	522	15	inevitably	inevitably	ADV
fuelectenerg-900	522	16	occur	occur	VERB
fuelectenerg-900	522	17	on	on	ADP
fuelectenerg-900	522	18	surfaces	surface	NOUN
fuelectenerg-900	522	19	of	of	ADP
fuelectenerg-900	522	20	all	all	DET
fuelectenerg-900	522	21	solid	solid	ADJ
fuelectenerg-900	522	22	bodies	body	NOUN
fuelectenerg-900	522	23	at	at	ADP
fuelectenerg-900	522	24	temperatures	temperature	NOUN
fuelectenerg-900	522	25	higher	high	ADJ
fuelectenerg-900	522	26	than	than	ADP
fuelectenerg-900	522	27	0	0	NUM
fuelectenerg-900	522	28	k	k	NOUN
fuelectenerg-900	522	29	,	,	PUNCT
fuelectenerg-900	522	30	and	and	CCONJ
fuelectenerg-900	522	31	at	at	ADP
fuelectenerg-900	522	32	pressures	pressure	NOUN
fuelectenerg-900	522	33	above	above	ADP
fuelectenerg-900	522	34	0	0	NUM
fuelectenerg-900	522	35	pa	pa	PROPN
fuelectenerg-900	522	36	.	.	PROPN
fuelectenerg-900	522	37	stochastic	stochastic	ADJ
fuelectenerg-900	522	38	nature	nature	NOUN
fuelectenerg-900	522	39	of	of	ADP
fuelectenerg-900	522	40	both	both	CCONJ
fuelectenerg-900	522	41	the	the	DET
fuelectenerg-900	522	42	instantaneous	instantaneous	ADJ
fuelectenerg-900	522	43	adsorption	adsorption	NOUN
fuelectenerg-900	522	44	and	and	CCONJ
fuelectenerg-900	522	45	desorption	desorption	NOUN
fuelectenerg-900	522	46	rate	rate	NOUN
fuelectenerg-900	522	47	results	result	NOUN
fuelectenerg-900	522	48	in	in	ADP
fuelectenerg-900	522	49	stochastic	stochastic	ADJ
fuelectenerg-900	522	50	fluctuations	fluctuation	NOUN
fuelectenerg-900	522	51	of	of	ADP
fuelectenerg-900	522	52	the	the	DET
fuelectenerg-900	522	53	adsorbed	adsorb	VERB
fuelectenerg-900	522	54	particles	particle	NOUN
fuelectenerg-900	522	55	number	number	NOUN
fuelectenerg-900	522	56	,	,	PUNCT
fuelectenerg-900	522	57	n(t	n(t	NOUN
fuelectenerg-900	522	58	)	)	PUNCT
fuelectenerg-900	522	59	,	,	PUNCT
fuelectenerg-900	522	60	and	and	CCONJ
fuelectenerg-900	522	61	consequently	consequently	ADV
fuelectenerg-900	522	62	the	the	DET
fuelectenerg-900	522	63	total	total	ADJ
fuelectenerg-900	522	64	adsorbed	adsorb	VERB
fuelectenerg-900	522	65	mass	mass	PROPN
fuelectenerg-900	522	66	fluctuates	fluctuate	NOUN
fuelectenerg-900	522	67	(	(	PUNCT
fuelectenerg-900	522	68	δm(t	δm(t	NUM
fuelectenerg-900	522	69	)	)	PUNCT
fuelectenerg-900	522	70	)	)	PUNCT
fuelectenerg-900	522	71	causing	cause	VERB
fuelectenerg-900	522	72	fluctuations	fluctuation	NOUN
fuelectenerg-900	522	73	of	of	ADP
fuelectenerg-900	522	74	the	the	DET
fuelectenerg-900	522	75	mechanical	mechanical	ADJ
fuelectenerg-900	522	76	resonance	resonance	NOUN
fuelectenerg-900	522	77	frequency	frequency	NOUN
fuelectenerg-900	522	78	of	of	ADP
fuelectenerg-900	522	79	the	the	DET
fuelectenerg-900	522	80	mems	mem	NOUN
fuelectenerg-900	522	81	/	/	SYM
fuelectenerg-900	522	82	nems	nems	PROPN
fuelectenerg-900	522	83	structure	structure	NOUN
fuelectenerg-900	522	84	,	,	PUNCT
fuelectenerg-900	522	85	δf(t	δf(t	NOUN
fuelectenerg-900	522	86	)	)	PUNCT
fuelectenerg-900	522	87	,	,	PUNCT
fuelectenerg-900	522	88	i.e.	i.e.	X
fuelectenerg-900	522	89	the	the	DET
fuelectenerg-900	522	90	resonator	resonator	NOUN
fuelectenerg-900	522	91	adsorption	adsorption	NOUN
fuelectenerg-900	522	92	-	-	PUNCT
fuelectenerg-900	522	93	desorption	desorption	NOUN
fuelectenerg-900	522	94	(	(	PUNCT
fuelectenerg-900	522	95	ad	ad	NOUN
fuelectenerg-900	522	96	)	)	PUNCT
fuelectenerg-900	522	97	frequency	frequency	NOUN
fuelectenerg-900	522	98	and	and	CCONJ
fuelectenerg-900	522	99	phase	phase	NOUN
fuelectenerg-900	522	100	noise	noise	NOUN
fuelectenerg-900	522	101	.	.	PUNCT
fuelectenerg-900	523	1	the	the	DET
fuelectenerg-900	523	2	mean	mean	ADJ
fuelectenerg-900	523	3	power	power	NOUN
fuelectenerg-900	523	4	of	of	ADP
fuelectenerg-900	523	5	ad	ad	NOUN
fuelectenerg-900	523	6	phase	phase	NOUN
fuelectenerg-900	523	7	noise	noise	NOUN
fuelectenerg-900	523	8	of	of	ADP
fuelectenerg-900	523	9	a	a	DET
fuelectenerg-900	523	10	resonator	resonator	NOUN
fuelectenerg-900	523	11	in	in	ADP
fuelectenerg-900	523	12	the	the	DET
fuelectenerg-900	523	13	bandwidth	bandwidth	NOUN
fuelectenerg-900	523	14	1	1	NUM
fuelectenerg-900	523	15	hz	hz	VERB
fuelectenerg-900	523	16	at	at	ADP
fuelectenerg-900	523	17	the	the	DET
fuelectenerg-900	523	18	offset	offset	ADJ
fuelectenerg-900	523	19	-	-	PUNCT
fuelectenerg-900	523	20	frequency	frequency	NOUN
fuelectenerg-900	523	21			NOUN
fuelectenerg-900	523	22	from	from	ADP
fuelectenerg-900	523	23	the	the	DET
fuelectenerg-900	523	24	nominal	nominal	ADJ
fuelectenerg-900	523	25	frequency	frequency	NOUN
fuelectenerg-900	523	26	f0	f0	PROPN
fuelectenerg-900	523	27	,	,	PUNCT
fuelectenerg-900	523	28	expressed	express	VERB
fuelectenerg-900	523	29	in	in	ADP
fuelectenerg-900	523	30	dbc	dbc	PROPN
fuelectenerg-900	523	31	/	/	SYM
fuelectenerg-900	523	32	hz	hz	PROPN
fuelectenerg-900	523	33	,	,	PUNCT
fuelectenerg-900	523	34	is	be	AUX
fuelectenerg-900	523	35	[	[	X
fuelectenerg-900	523	36	123	123	NUM
fuelectenerg-900	523	37	]	]	SYM
fuelectenerg-900	523	38	370	370	NUM
fuelectenerg-900	523	39	i.	i.	NOUN
fuelectenerg-900	523	40	jokić	jokić	PROPN
fuelectenerg-900	523	41	,	,	PUNCT
fuelectenerg-900	523	42	m.	m.	NOUN
fuelectenerg-900	523	43	frantlović	frantlović	NOUN
fuelectenerg-900	523	44	,	,	PUNCT
fuelectenerg-900	523	45	z.	z.	PROPN
fuelectenerg-900	523	46	djurić	djurić	PROPN
fuelectenerg-900	523	47	,	,	PUNCT
fuelectenerg-900	523	48	m.	m.	NOUN
fuelectenerg-900	523	49	l.	l.	PROPN
fuelectenerg-900	523	50	dukić	dukić	PROPN
fuelectenerg-900	523	51	2	2	NUM
fuelectenerg-900	523	52	2	2	NUM
fuelectenerg-900	523	53	2	2	NUM
fuelectenerg-900	523	54	010log	010log	NUM
fuelectenerg-900	523	55	(	(	PUNCT
fuelectenerg-900	523	56	(	(	PUNCT
fuelectenerg-900	523	57	)	)	PUNCT
fuelectenerg-900	523	58	/(2	/(2	PUNCT
fuelectenerg-900	523	59	)	)	PUNCT
fuelectenerg-900	523	60	)	)	PUNCT
fuelectenerg-900	524	1	10log	10log	PROPN
fuelectenerg-900	524	2	(	(	PUNCT
fuelectenerg-900	524	3	(	(	PUNCT
fuelectenerg-900	524	4	/	/	SYM
fuelectenerg-900	524	5	2	2	NUM
fuelectenerg-900	524	6	)	)	PUNCT
fuelectenerg-900	524	7	(	(	PUNCT
fuelectenerg-900	524	8	)	)	PUNCT
fuelectenerg-900	524	9	/(2	/(2	PUNCT
fuelectenerg-900	524	10	)	)	PUNCT
fuelectenerg-900	524	11	)	)	PUNCT
fuelectenerg-900	525	1	r	r	NOUN
fuelectenerg-900	525	2	f	f	X
fuelectenerg-900	525	3	ml	ml	X
fuelectenerg-900	525	4	s	s	PROPN
fuelectenerg-900	525	5	f	f	PROPN
fuelectenerg-900	525	6	m	m	ADJ
fuelectenerg-900	525	7	s	s	PROPN
fuelectenerg-900	525	8			ADJ
fuelectenerg-900	525	9			PROPN
fuelectenerg-900	525	10			PROPN
fuelectenerg-900	525	11			PROPN
fuelectenerg-900	525	12			PROPN
fuelectenerg-900	525	13	(	(	PUNCT
fuelectenerg-900	525	14	6	6	NUM
fuelectenerg-900	525	15	)	)	PUNCT
fuelectenerg-900	525	16	where	where	SCONJ
fuelectenerg-900	525	17	sδν(	sδν(	PROPN
fuelectenerg-900	525	18	)	)	PUNCT
fuelectenerg-900	525	19	is	be	AUX
fuelectenerg-900	525	20	the	the	DET
fuelectenerg-900	525	21	power	power	NOUN
fuelectenerg-900	525	22	spectral	spectral	ADJ
fuelectenerg-900	525	23	density	density	NOUN
fuelectenerg-900	525	24	(	(	PUNCT
fuelectenerg-900	525	25	psd	psd	NOUN
fuelectenerg-900	525	26	)	)	PUNCT
fuelectenerg-900	525	27	of	of	ADP
fuelectenerg-900	525	28	resonator	resonator	NOUN
fuelectenerg-900	525	29	ad	ad	NOUN
fuelectenerg-900	525	30	frequency	frequency	NOUN
fuelectenerg-900	525	31	noise	noise	NOUN
fuelectenerg-900	525	32	.	.	PUNCT
fuelectenerg-900	526	1	both	both	DET
fuelectenerg-900	526	2	these	these	DET
fuelectenerg-900	526	3	quantities	quantity	NOUN
fuelectenerg-900	526	4	are	be	AUX
fuelectenerg-900	526	5	determined	determine	VERB
fuelectenerg-900	526	6	by	by	ADP
fuelectenerg-900	526	7	the	the	DET
fuelectenerg-900	526	8	psd	psd	NOUN
fuelectenerg-900	526	9	of	of	ADP
fuelectenerg-900	526	10	the	the	DET
fuelectenerg-900	526	11	adsorbed	adsorb	VERB
fuelectenerg-900	526	12	mass	mass	NOUN
fuelectenerg-900	526	13	fluctuations	fluctuation	NOUN
fuelectenerg-900	526	14	,	,	PUNCT
fuelectenerg-900	526	15	sδm(	sδm(	ADJ
fuelectenerg-900	526	16	)	)	PUNCT
fuelectenerg-900	526	17	(	(	PUNCT
fuelectenerg-900	526	18	m	m	NOUN
fuelectenerg-900	526	19	is	be	AUX
fuelectenerg-900	526	20	the	the	DET
fuelectenerg-900	526	21	resonator	resonator	NOUN
fuelectenerg-900	526	22	mass	mass	NOUN
fuelectenerg-900	526	23	)	)	PUNCT
fuelectenerg-900	526	24	.	.	PUNCT
fuelectenerg-900	527	1	in	in	ADP
fuelectenerg-900	527	2	order	order	NOUN
fuelectenerg-900	527	3	to	to	PART
fuelectenerg-900	527	4	perform	perform	VERB
fuelectenerg-900	527	5	the	the	DET
fuelectenerg-900	527	6	statistical	statistical	ADJ
fuelectenerg-900	527	7	analysis	analysis	NOUN
fuelectenerg-900	527	8	of	of	ADP
fuelectenerg-900	527	9	ad	ad	NOUN
fuelectenerg-900	527	10	processes	process	NOUN
fuelectenerg-900	527	11	by	by	ADP
fuelectenerg-900	527	12	using	use	VERB
fuelectenerg-900	527	13	the	the	DET
fuelectenerg-900	527	14	approach	approach	NOUN
fuelectenerg-900	527	15	which	which	PRON
fuelectenerg-900	527	16	is	be	AUX
fuelectenerg-900	527	17	common	common	ADJ
fuelectenerg-900	527	18	for	for	ADP
fuelectenerg-900	527	19	gain	gain	NOUN
fuelectenerg-900	527	20	-	-	PUNCT
fuelectenerg-900	527	21	loss	loss	NOUN
fuelectenerg-900	527	22	processes	process	NOUN
fuelectenerg-900	527	23	(	(	PUNCT
fuelectenerg-900	527	24	ad	ad	NOUN
fuelectenerg-900	527	25	processes	process	NOUN
fuelectenerg-900	527	26	and	and	CCONJ
fuelectenerg-900	527	27	generation	generation	NOUN
fuelectenerg-900	527	28	-	-	PUNCT
fuelectenerg-900	527	29	recombination	recombination	NOUN
fuelectenerg-900	527	30	(	(	PUNCT
fuelectenerg-900	527	31	gr	gr	NOUN
fuelectenerg-900	527	32	)	)	PUNCT
fuelectenerg-900	527	33	processes	process	NOUN
fuelectenerg-900	527	34	belong	belong	VERB
fuelectenerg-900	527	35	to	to	ADP
fuelectenerg-900	527	36	them	they	PRON
fuelectenerg-900	527	37	)	)	PUNCT
fuelectenerg-900	527	38	,	,	PUNCT
fuelectenerg-900	527	39	the	the	DET
fuelectenerg-900	527	40	equation(s	equation(s	NOUN
fuelectenerg-900	527	41	)	)	PUNCT
fuelectenerg-900	527	42	describing	describe	VERB
fuelectenerg-900	527	43	the	the	DET
fuelectenerg-900	527	44	change	change	NOUN
fuelectenerg-900	527	45	of	of	ADP
fuelectenerg-900	527	46	the	the	DET
fuelectenerg-900	527	47	number	number	NOUN
fuelectenerg-900	527	48	of	of	ADP
fuelectenerg-900	527	49	adsorbed	adsorb	VERB
fuelectenerg-900	527	50	gas	gas	NOUN
fuelectenerg-900	527	51	particles	particle	NOUN
fuelectenerg-900	527	52	in	in	ADP
fuelectenerg-900	527	53	time	time	NOUN
fuelectenerg-900	527	54	is	be	AUX
fuelectenerg-900	527	55	(	(	PUNCT
fuelectenerg-900	527	56	are	be	AUX
fuelectenerg-900	527	57	)	)	PUNCT
fuelectenerg-900	527	58	shown	show	VERB
fuelectenerg-900	527	59	in	in	ADP
fuelectenerg-900	527	60	the	the	DET
fuelectenerg-900	527	61	general	general	ADJ
fuelectenerg-900	527	62	langevin	langevin	PROPN
fuelectenerg-900	527	63	form	form	PROPN
fuelectenerg-900	527	64	inieniei	inieniei	PROPN
fuelectenerg-900	527	65	nnnrnnngdtdn	nnnrnnngdtdn	PROPN
fuelectenerg-900	527	66	ξ),	ξ),	PROPN
fuelectenerg-900	527	67	...	...	PUNCT
fuelectenerg-900	527	68	,,(),	,,(),	PROPN
fuelectenerg-900	527	69	...	...	PUNCT
fuelectenerg-900	527	70	,,(/	,,(/	PUNCT
fuelectenerg-900	527	71	2121	2121	NUM
fuelectenerg-900	527	72			X
fuelectenerg-900	527	73	(	(	PUNCT
fuelectenerg-900	527	74	7	7	X
fuelectenerg-900	527	75	)	)	PUNCT
fuelectenerg-900	527	76	i=1,2,	i=1,2,	NOUN
fuelectenerg-900	527	77	...	...	PUNCT
fuelectenerg-900	527	78	n	n	CCONJ
fuelectenerg-900	527	79	,	,	PUNCT
fuelectenerg-900	527	80	valid	valid	ADJ
fuelectenerg-900	527	81	for	for	ADP
fuelectenerg-900	527	82	different	different	ADJ
fuelectenerg-900	527	83	types	type	NOUN
fuelectenerg-900	527	84	of	of	ADP
fuelectenerg-900	527	85	ad	ad	NOUN
fuelectenerg-900	527	86	processes	process	NOUN
fuelectenerg-900	527	87	.	.	PUNCT
fuelectenerg-900	528	1	here	here	ADV
fuelectenerg-900	528	2	,	,	PUNCT
fuelectenerg-900	528	3	n1	n1	PUNCT
fuelectenerg-900	528	4	is	be	AUX
fuelectenerg-900	528	5	the	the	DET
fuelectenerg-900	528	6	total	total	ADJ
fuelectenerg-900	528	7	number	number	NOUN
fuelectenerg-900	528	8	of	of	ADP
fuelectenerg-900	528	9	gases	gas	NOUN
fuelectenerg-900	528	10	in	in	ADP
fuelectenerg-900	528	11	the	the	DET
fuelectenerg-900	528	12	resonator	resonator	NOUN
fuelectenerg-900	528	13	surroundings	surrounding	NOUN
fuelectenerg-900	528	14	whose	whose	DET
fuelectenerg-900	528	15	particles	particle	NOUN
fuelectenerg-900	528	16	adsorb	adsorb	VERB
fuelectenerg-900	528	17	in	in	ADP
fuelectenerg-900	528	18	a	a	DET
fuelectenerg-900	528	19	single	single	ADJ
fuelectenerg-900	528	20	layer	layer	NOUN
fuelectenerg-900	528	21	on	on	ADP
fuelectenerg-900	528	22	the	the	DET
fuelectenerg-900	528	23	resonator	resonator	NOUN
fuelectenerg-900	528	24	surface	surface	NOUN
fuelectenerg-900	528	25	[	[	X
fuelectenerg-900	528	26	113	113	NUM
fuelectenerg-900	528	27	,	,	PUNCT
fuelectenerg-900	528	28	115	115	NUM
fuelectenerg-900	528	29	-	-	SYM
fuelectenerg-900	528	30	119	119	NUM
fuelectenerg-900	528	31	]	]	PUNCT
fuelectenerg-900	528	32	,	,	PUNCT
fuelectenerg-900	528	33	or	or	CCONJ
fuelectenerg-900	528	34	the	the	DET
fuelectenerg-900	528	35	total	total	ADJ
fuelectenerg-900	528	36	number	number	NOUN
fuelectenerg-900	528	37	of	of	ADP
fuelectenerg-900	528	38	adsorbed	adsorb	VERB
fuelectenerg-900	528	39	layers	layer	NOUN
fuelectenerg-900	528	40	in	in	ADP
fuelectenerg-900	528	41	the	the	DET
fuelectenerg-900	528	42	case	case	NOUN
fuelectenerg-900	528	43	of	of	ADP
fuelectenerg-900	528	44	multilayer	multilayer	ADJ
fuelectenerg-900	528	45	single	single	ADJ
fuelectenerg-900	528	46	-	-	PUNCT
fuelectenerg-900	528	47	gas	gas	NOUN
fuelectenerg-900	528	48	adsorption	adsorption	NOUN
fuelectenerg-900	528	49	[	[	X
fuelectenerg-900	528	50	120	120	NUM
fuelectenerg-900	528	51	,	,	PUNCT
fuelectenerg-900	528	52	121	121	NUM
fuelectenerg-900	528	53	]	]	PUNCT
fuelectenerg-900	528	54	.	.	PUNCT
fuelectenerg-900	529	1	the	the	DET
fuelectenerg-900	529	2	index	index	NOUN
fuelectenerg-900	529	3	"	"	PUNCT
fuelectenerg-900	529	4	i	i	PRON
fuelectenerg-900	529	5	"	"	PUNCT
fuelectenerg-900	529	6	refers	refer	VERB
fuelectenerg-900	529	7	to	to	ADP
fuelectenerg-900	529	8	i	i	PRON
fuelectenerg-900	529	9	th	th	NOUN
fuelectenerg-900	529	10	gas	gas	NOUN
fuelectenerg-900	529	11	in	in	ADP
fuelectenerg-900	529	12	a	a	DET
fuelectenerg-900	529	13	gas	gas	NOUN
fuelectenerg-900	529	14	mixture	mixture	NOUN
fuelectenerg-900	529	15	,	,	PUNCT
fuelectenerg-900	529	16	or	or	CCONJ
fuelectenerg-900	529	17	to	to	ADP
fuelectenerg-900	529	18	the	the	DET
fuelectenerg-900	529	19	particles	particle	NOUN
fuelectenerg-900	529	20	in	in	ADP
fuelectenerg-900	529	21	the	the	DET
fuelectenerg-900	529	22	i	i	PROPN
fuelectenerg-900	529	23	th	th	NOUN
fuelectenerg-900	529	24	adsorbing	adsorb	VERB
fuelectenerg-900	529	25	layer	layer	NOUN
fuelectenerg-900	529	26	(	(	PUNCT
fuelectenerg-900	529	27	which	which	PRON
fuelectenerg-900	529	28	are	be	AUX
fuelectenerg-900	529	29	not	not	PART
fuelectenerg-900	529	30	covered	cover	VERB
fuelectenerg-900	529	31	by	by	ADP
fuelectenerg-900	529	32	(	(	PUNCT
fuelectenerg-900	529	33	i+1	i+1	NOUN
fuelectenerg-900	529	34	)	)	PUNCT
fuelectenerg-900	529	35	th	th	NOUN
fuelectenerg-900	529	36	layer	layer	NOUN
fuelectenerg-900	529	37	)	)	PUNCT
fuelectenerg-900	529	38	.	.	PUNCT
fuelectenerg-900	530	1	the	the	DET
fuelectenerg-900	530	2	equivalent	equivalent	ADJ
fuelectenerg-900	530	3	rate	rate	NOUN
fuelectenerg-900	530	4	of	of	ADP
fuelectenerg-900	530	5	"	"	PUNCT
fuelectenerg-900	530	6	generation	generation	NOUN
fuelectenerg-900	530	7	"	"	PUNCT
fuelectenerg-900	530	8	of	of	ADP
fuelectenerg-900	530	9	adsorbed	adsorb	VERB
fuelectenerg-900	530	10	particles	particle	NOUN
fuelectenerg-900	530	11	of	of	ADP
fuelectenerg-900	530	12	the	the	DET
fuelectenerg-900	530	13	type	type	NOUN
fuelectenerg-900	530	14	i	i	PRON
fuelectenerg-900	530	15	(	(	PUNCT
fuelectenerg-900	530	16	i.e.	i.e.	X
fuelectenerg-900	530	17	of	of	ADP
fuelectenerg-900	530	18	increase	increase	NOUN
fuelectenerg-900	530	19	of	of	ADP
fuelectenerg-900	530	20	their	their	PRON
fuelectenerg-900	530	21	number	number	NOUN
fuelectenerg-900	530	22	)	)	PUNCT
fuelectenerg-900	530	23	and	and	CCONJ
fuelectenerg-900	530	24	the	the	DET
fuelectenerg-900	530	25	equivalent	equivalent	ADJ
fuelectenerg-900	530	26	rate	rate	NOUN
fuelectenerg-900	530	27	of	of	ADP
fuelectenerg-900	530	28	their	their	PRON
fuelectenerg-900	530	29	"	"	PUNCT
fuelectenerg-900	530	30	recombination	recombination	NOUN
fuelectenerg-900	530	31	"	"	PUNCT
fuelectenerg-900	530	32	(	(	PUNCT
fuelectenerg-900	530	33	i.e.	i.e.	X
fuelectenerg-900	530	34	of	of	ADP
fuelectenerg-900	530	35	decrease	decrease	NOUN
fuelectenerg-900	530	36	of	of	ADP
fuelectenerg-900	530	37	their	their	PRON
fuelectenerg-900	530	38	number	number	NOUN
fuelectenerg-900	530	39	)	)	PUNCT
fuelectenerg-900	530	40	,	,	PUNCT
fuelectenerg-900	530	41	gie	gie	NOUN
fuelectenerg-900	530	42	and	and	CCONJ
fuelectenerg-900	530	43	rie	rie	X
fuelectenerg-900	530	44	,	,	PUNCT
fuelectenerg-900	530	45	respectively	respectively	ADV
fuelectenerg-900	530	46	,	,	PUNCT
fuelectenerg-900	530	47	take	take	VERB
fuelectenerg-900	530	48	into	into	ADP
fuelectenerg-900	530	49	account	account	NOUN
fuelectenerg-900	530	50	the	the	DET
fuelectenerg-900	530	51	influences	influence	NOUN
fuelectenerg-900	530	52	of	of	ADP
fuelectenerg-900	530	53	all	all	DET
fuelectenerg-900	530	54	the	the	DET
fuelectenerg-900	530	55	processes	process	NOUN
fuelectenerg-900	530	56	relevant	relevant	ADJ
fuelectenerg-900	530	57	for	for	ADP
fuelectenerg-900	530	58	the	the	DET
fuelectenerg-900	530	59	change	change	NOUN
fuelectenerg-900	530	60	of	of	ADP
fuelectenerg-900	530	61	ni	ni	PROPN
fuelectenerg-900	530	62	,	,	PUNCT
fuelectenerg-900	530	63	and	and	CCONJ
fuelectenerg-900	530	64	their	their	PRON
fuelectenerg-900	530	65	forms	form	NOUN
fuelectenerg-900	530	66	differ	differ	VERB
fuelectenerg-900	530	67	depending	depend	VERB
fuelectenerg-900	530	68	on	on	ADP
fuelectenerg-900	530	69	the	the	DET
fuelectenerg-900	530	70	analyzed	analyze	VERB
fuelectenerg-900	530	71	case	case	NOUN
fuelectenerg-900	530	72	of	of	ADP
fuelectenerg-900	530	73	adsorption	adsorption	NOUN
fuelectenerg-900	530	74	on	on	ADP
fuelectenerg-900	530	75	the	the	DET
fuelectenerg-900	530	76	surface	surface	NOUN
fuelectenerg-900	530	77	of	of	ADP
fuelectenerg-900	530	78	micro	micro	NOUN
fuelectenerg-900	530	79	/	/	NOUN
fuelectenerg-900	530	80	nanostructures	nanostructure	NOUN
fuelectenerg-900	530	81	:	:	PUNCT
fuelectenerg-900	530	82	single	single	ADJ
fuelectenerg-900	530	83	gas	gas	NOUN
fuelectenerg-900	530	84	single	single	ADJ
fuelectenerg-900	530	85	-	-	PUNCT
fuelectenerg-900	530	86	layer	layer	NOUN
fuelectenerg-900	530	87	adsorption	adsorption	NOUN
fuelectenerg-900	530	88	[	[	X
fuelectenerg-900	530	89	115	115	NUM
fuelectenerg-900	530	90	]	]	PUNCT
fuelectenerg-900	530	91	,	,	PUNCT
fuelectenerg-900	530	92	single	single	ADJ
fuelectenerg-900	530	93	-	-	PUNCT
fuelectenerg-900	530	94	layer	layer	NOUN
fuelectenerg-900	530	95	adsorption	adsorption	NOUN
fuelectenerg-900	530	96	of	of	ADP
fuelectenerg-900	530	97	an	an	DET
fuelectenerg-900	530	98	arbitrary	arbitrary	ADJ
fuelectenerg-900	530	99	number	number	NOUN
fuelectenerg-900	530	100	of	of	ADP
fuelectenerg-900	530	101	gases	gas	NOUN
fuelectenerg-900	530	102	[	[	X
fuelectenerg-900	530	103	116	116	NUM
fuelectenerg-900	530	104	,	,	PUNCT
fuelectenerg-900	530	105	117	117	NUM
fuelectenerg-900	530	106	]	]	PUNCT
fuelectenerg-900	530	107	,	,	PUNCT
fuelectenerg-900	530	108	adsorption	adsorption	NOUN
fuelectenerg-900	530	109	in	in	ADP
fuelectenerg-900	530	110	an	an	DET
fuelectenerg-900	530	111	arbitrary	arbitrary	ADJ
fuelectenerg-900	530	112	number	number	NOUN
fuelectenerg-900	530	113	of	of	ADP
fuelectenerg-900	530	114	layers	layer	NOUN
fuelectenerg-900	530	115	[	[	X
fuelectenerg-900	530	116	120	120	NUM
fuelectenerg-900	530	117	,	,	PUNCT
fuelectenerg-900	530	118	121	121	NUM
fuelectenerg-900	530	119	]	]	PUNCT
fuelectenerg-900	530	120	,	,	PUNCT
fuelectenerg-900	530	121	or	or	CCONJ
fuelectenerg-900	530	122	adsorption	adsorption	NOUN
fuelectenerg-900	530	123	coupled	couple	VERB
fuelectenerg-900	530	124	with	with	ADP
fuelectenerg-900	530	125	mass	mass	ADJ
fuelectenerg-900	530	126	transfer	transfer	NOUN
fuelectenerg-900	530	127	[	[	X
fuelectenerg-900	530	128	118	118	NUM
fuelectenerg-900	530	129	-	-	SYM
fuelectenerg-900	530	130	119	119	NUM
fuelectenerg-900	530	131	]	]	PUNCT
fuelectenerg-900	530	132	)	)	PUNCT
fuelectenerg-900	530	133	.	.	PUNCT
fuelectenerg-900	531	1	i	i	X
fuelectenerg-900	531	2	is	be	AUX
fuelectenerg-900	531	3	the	the	DET
fuelectenerg-900	531	4	stochastic	stochastic	ADJ
fuelectenerg-900	531	5	source	source	NOUN
fuelectenerg-900	531	6	function	function	NOUN
fuelectenerg-900	531	7	.	.	PUNCT
fuelectenerg-900	532	1	for	for	ADP
fuelectenerg-900	532	2	small	small	ADJ
fuelectenerg-900	532	3	fluctuations	fluctuation	NOUN
fuelectenerg-900	532	4	(	(	PUNCT
fuelectenerg-900	532	5	ni	ni	NUM
fuelectenerg-900	532	6	)	)	PUNCT
fuelectenerg-900	532	7	of	of	ADP
fuelectenerg-900	532	8	the	the	DET
fuelectenerg-900	532	9	number	number	NOUN
fuelectenerg-900	532	10	of	of	ADP
fuelectenerg-900	532	11	adsorbed	adsorb	VERB
fuelectenerg-900	532	12	particles	particle	NOUN
fuelectenerg-900	532	13	around	around	ADP
fuelectenerg-900	532	14	the	the	DET
fuelectenerg-900	532	15	corresponding	corresponding	ADJ
fuelectenerg-900	532	16	equilibrium	equilibrium	NOUN
fuelectenerg-900	532	17	value	value	NOUN
fuelectenerg-900	532	18	(	(	PUNCT
fuelectenerg-900	532	19	nie	nie	PROPN
fuelectenerg-900	532	20	)	)	PUNCT
fuelectenerg-900	532	21	,	,	PUNCT
fuelectenerg-900	532	22	so	so	SCONJ
fuelectenerg-900	532	23	that	that	SCONJ
fuelectenerg-900	532	24	ninie	ninie	PROPN
fuelectenerg-900	532	25	,	,	PUNCT
fuelectenerg-900	532	26	eqs	eqs	X
fuelectenerg-900	532	27	.	.	PUNCT
fuelectenerg-900	532	28	(	(	PUNCT
fuelectenerg-900	532	29	7	7	X
fuelectenerg-900	532	30	)	)	PUNCT
fuelectenerg-900	532	31	can	can	AUX
fuelectenerg-900	532	32	be	be	AUX
fuelectenerg-900	532	33	written	write	VERB
fuelectenerg-900	532	34	in	in	ADP
fuelectenerg-900	532	35	the	the	DET
fuelectenerg-900	532	36	matrix	matrix	NOUN
fuelectenerg-900	532	37	form	form	NOUN
fuelectenerg-900	532	38	1	1	NUM
fuelectenerg-900	532	39	2	2	NUM
fuelectenerg-900	532	40	1	1	NUM
fuelectenerg-900	532	41	2	2	NUM
fuelectenerg-900	532	42	1	1	NUM
fuelectenerg-900	532	43	2	2	NUM
fuelectenerg-900	532	44	(	(	PUNCT
fuelectenerg-900	532	45	[	[	PUNCT
fuelectenerg-900	532	46	...	...	PUNCT
fuelectenerg-900	532	47	]	]	PUNCT
fuelectenerg-900	532	48	)	)	PUNCT
fuelectenerg-900	532	49	/	/	PUNCT
fuelectenerg-900	533	1	[	[	X
fuelectenerg-900	533	2	...	...	PUNCT
fuelectenerg-900	533	3	]	]	PUNCT
fuelectenerg-900	533	4	[	[	PUNCT
fuelectenerg-900	533	5	...	...	PUNCT
fuelectenerg-900	533	6	]	]	X
fuelectenerg-900	533	7	t	t	X
fuelectenerg-900	533	8	t	t	PROPN
fuelectenerg-900	533	9	t	t	PROPN
fuelectenerg-900	533	10	n	n	PROPN
fuelectenerg-900	533	11	n	n	PROPN
fuelectenerg-900	533	12	nd	nd	NOUN
fuelectenerg-900	533	13	n	n	PROPN
fuelectenerg-900	533	14	n	n	CCONJ
fuelectenerg-900	533	15	n	n	ADV
fuelectenerg-900	533	16	dt	dt	NOUN
fuelectenerg-900	533	17	n	n	CCONJ
fuelectenerg-900	533	18	n	n	CCONJ
fuelectenerg-900	533	19	n	n	PRON
fuelectenerg-900	533	20	ξ	ξ	PROPN
fuelectenerg-900	533	21	ξ	ξ	PROPN
fuelectenerg-900	533	22	ξ	ξ	PROPN
fuelectenerg-900	533	23			PUNCT
fuelectenerg-900	533	24			X
fuelectenerg-900	533	25			PROPN
fuelectenerg-900	533	26			PROPN
fuelectenerg-900	533	27			NUM
fuelectenerg-900	533	28			PUNCT
fuelectenerg-900	533	29			NOUN
fuelectenerg-900	533	30			X
fuelectenerg-900	533	31	k	k	PROPN
fuelectenerg-900	533	32	(	(	PUNCT
fuelectenerg-900	533	33	8)	8)	NUM
fuelectenerg-900	533	34	ξnkn	ξnkn	NOUN
fuelectenerg-900	533	35			VERB
fuelectenerg-900	533	36	dtd	dtd	NOUN
fuelectenerg-900	533	37	/	/	PUNCT
fuelectenerg-900	533	38	)	)	PUNCT
fuelectenerg-900	533	39	(	(	PUNCT
fuelectenerg-900	533	40	(	(	PUNCT
fuelectenerg-900	533	41	9	9	X
fuelectenerg-900	533	42	)	)	PUNCT
fuelectenerg-900	533	43	where	where	SCONJ
fuelectenerg-900	533	44	k	k	PROPN
fuelectenerg-900	533	45	is	be	AUX
fuelectenerg-900	533	46	the	the	DET
fuelectenerg-900	533	47	nn	nn	PROPN
fuelectenerg-900	533	48	matrix	matrix	NOUN
fuelectenerg-900	533	49	of	of	ADP
fuelectenerg-900	533	50	elements	element	NOUN
fuelectenerg-900	533	51	kij=-(gie/nj-rie/nj)n	kij=-(gie/nj-rie/nj)n	PROPN
fuelectenerg-900	533	52	=	=	SYM
fuelectenerg-900	533	53	ne	ne	PROPN
fuelectenerg-900	533	54	,	,	PUNCT
fuelectenerg-900	533	55	n=[n1	n=[n1	PROPN
fuelectenerg-900	533	56	n2	n2	PROPN
fuelectenerg-900	533	57	...	...	PUNCT
fuelectenerg-900	533	58	nn	nn	X
fuelectenerg-900	533	59	]	]	X
fuelectenerg-900	533	60	t	t	PROPN
fuelectenerg-900	533	61	,	,	PUNCT
fuelectenerg-900	533	62	δn=[δn1	δn=[δn1	PROPN
fuelectenerg-900	533	63	δn2	δn2	X
fuelectenerg-900	533	64	...	...	PUNCT
fuelectenerg-900	534	1	δnn	δnn	X
fuelectenerg-900	534	2	]	]	X
fuelectenerg-900	534	3	t	t	NOUN
fuelectenerg-900	534	4	,	,	PUNCT
fuelectenerg-900	534	5	and	and	CCONJ
fuelectenerg-900	534	6	ne=[n1e	ne=[n1e	PROPN
fuelectenerg-900	534	7	n2e	n2e	NOUN
fuelectenerg-900	534	8	...	...	PUNCT
fuelectenerg-900	534	9	nne	nne	PROPN
fuelectenerg-900	534	10	]	]	X
fuelectenerg-900	534	11	t	t	PROPN
fuelectenerg-900	534	12	is	be	AUX
fuelectenerg-900	534	13	the	the	DET
fuelectenerg-900	534	14	vector	vector	NOUN
fuelectenerg-900	534	15	of	of	ADP
fuelectenerg-900	534	16	steady	steady	ADJ
fuelectenerg-900	534	17	-	-	PUNCT
fuelectenerg-900	534	18	state	state	NOUN
fuelectenerg-900	534	19	values	value	NOUN
fuelectenerg-900	534	20	nie	nie	PROPN
fuelectenerg-900	534	21	,	,	PUNCT
fuelectenerg-900	534	22	which	which	PRON
fuelectenerg-900	534	23	are	be	AUX
fuelectenerg-900	534	24	obtained	obtain	VERB
fuelectenerg-900	534	25	from	from	ADP
fuelectenerg-900	534	26	the	the	DET
fuelectenerg-900	534	27	steady	steady	ADJ
fuelectenerg-900	534	28	state	state	NOUN
fuelectenerg-900	534	29	conditions	condition	NOUN
fuelectenerg-900	534	30	gie(n1e	gie(n1e	PROPN
fuelectenerg-900	534	31	,	,	PUNCT
fuelectenerg-900	534	32	n2e,	n2e,	NOUN
fuelectenerg-900	534	33	...	...	PUNCT
fuelectenerg-900	534	34	nne)=rie(n1e	nne)=rie(n1e	NOUN
fuelectenerg-900	534	35	,	,	PUNCT
fuelectenerg-900	534	36	n2e	n2e	NOUN
fuelectenerg-900	534	37	,	,	PUNCT
fuelectenerg-900	534	38	...	...	PUNCT
fuelectenerg-900	534	39	nne	nne	PROPN
fuelectenerg-900	534	40	)	)	PUNCT
fuelectenerg-900	534	41	.	.	PUNCT
fuelectenerg-900	535	1	by	by	ADP
fuelectenerg-900	535	2	performing	perform	VERB
fuelectenerg-900	535	3	fourier	fourier	ADJ
fuelectenerg-900	535	4	analysis	analysis	NOUN
fuelectenerg-900	535	5	,	,	PUNCT
fuelectenerg-900	535	6	a	a	DET
fuelectenerg-900	535	7	square	square	ADJ
fuelectenerg-900	535	8	nn	nn	PROPN
fuelectenerg-900	535	9	matrix	matrix	NOUN
fuelectenerg-900	535	10	sn2(ω	sn2(ω	NOUN
fuelectenerg-900	535	11	)	)	PUNCT
fuelectenerg-900	535	12	is	be	AUX
fuelectenerg-900	535	13	obtained	obtain	VERB
fuelectenerg-900	535	14	1	1	NUM
fuelectenerg-900	535	15	ξ	ξ	SYM
fuelectenerg-900	535	16	1	1	NUM
fuelectenerg-900	535	17	)	)	PUNCT
fuelectenerg-900	535	18	ω()ω()ω(2	ω()ω()ω(2	PROPN
fuelectenerg-900	535	19			NUM
fuelectenerg-900	535	20			PUNCT
fuelectenerg-900	536	1			PROPN
fuelectenerg-900	536	2	iksiks	iksik	VERB
fuelectenerg-900	536	3	t	t	PROPN
fuelectenerg-900	536	4	n	n	PROPN
fuelectenerg-900	536	5	jj	jj	PROPN
fuelectenerg-900	536	6	(	(	PUNCT
fuelectenerg-900	536	7	10	10	NUM
fuelectenerg-900	536	8	)	)	PUNCT
fuelectenerg-900	536	9	its	its	PRON
fuelectenerg-900	536	10	elements	element	NOUN
fuelectenerg-900	536	11	(	(	PUNCT
fuelectenerg-900	536	12	i	i	PROPN
fuelectenerg-900	536	13	,	,	PUNCT
fuelectenerg-900	536	14	j	j	PROPN
fuelectenerg-900	536	15	)	)	PUNCT
fuelectenerg-900	536	16	are	be	AUX
fuelectenerg-900	536	17	single	single	ADJ
fuelectenerg-900	536	18	-	-	PUNCT
fuelectenerg-900	536	19	sided	sided	ADJ
fuelectenerg-900	536	20	spectral	spectral	ADJ
fuelectenerg-900	536	21	and	and	CCONJ
fuelectenerg-900	536	22	cross	cross	ADJ
fuelectenerg-900	536	23	-	-	ADJ
fuelectenerg-900	536	24	spectral	spectral	ADJ
fuelectenerg-900	536	25	densities	density	NOUN
fuelectenerg-900	536	26	,	,	PUNCT
fuelectenerg-900	536	27	sninj*(	sninj*(	NOUN
fuelectenerg-900	536	28	)	)	PUNCT
fuelectenerg-900	537	1	[	[	X
fuelectenerg-900	537	2	119	119	NUM
fuelectenerg-900	537	3	supplementary	supplementary	ADJ
fuelectenerg-900	537	4	data	datum	NOUN
fuelectenerg-900	537	5	]	]	PUNCT
fuelectenerg-900	537	6	.	.	PUNCT
fuelectenerg-900	538	1	according	accord	VERB
fuelectenerg-900	538	2	to	to	ADP
fuelectenerg-900	538	3	the	the	DET
fuelectenerg-900	538	4	stochastic	stochastic	ADJ
fuelectenerg-900	538	5	analysis	analysis	NOUN
fuelectenerg-900	538	6	of	of	ADP
fuelectenerg-900	538	7	gr	gr	ADP
fuelectenerg-900	538	8	processes	process	NOUN
fuelectenerg-900	538	9	[	[	X
fuelectenerg-900	538	10	124	124	NUM
fuelectenerg-900	538	11	]	]	PUNCT
fuelectenerg-900	538	12	and	and	CCONJ
fuelectenerg-900	538	13	the	the	DET
fuelectenerg-900	538	14	analogy	analogy	NOUN
fuelectenerg-900	538	15	with	with	ADP
fuelectenerg-900	538	16	ad	ad	NOUN
fuelectenerg-900	538	17	processes	process	NOUN
fuelectenerg-900	538	18	,	,	PUNCT
fuelectenerg-900	538	19	the	the	DET
fuelectenerg-900	538	20	psd	psd	NOUN
fuelectenerg-900	538	21	of	of	ADP
fuelectenerg-900	538	22	the	the	DET
fuelectenerg-900	538	23	i	i	PROPN
fuelectenerg-900	538	24	th	th	X
fuelectenerg-900	538	25	source	source	NOUN
fuelectenerg-900	538	26	function	function	NOUN
fuelectenerg-900	538	27	equals	equal	VERB
fuelectenerg-900	538	28	si	si	NOUN
fuelectenerg-900	538	29	=	=	SYM
fuelectenerg-900	538	30	4gie(n1e	4gie(n1e	NUM
fuelectenerg-900	538	31	,	,	PUNCT
fuelectenerg-900	538	32	n2e	n2e	NOUN
fuelectenerg-900	538	33	,	,	PUNCT
fuelectenerg-900	538	34	...	...	PUNCT
fuelectenerg-900	538	35	,	,	PUNCT
fuelectenerg-900	538	36	nne)=4giee	nne)=4giee	PROPN
fuelectenerg-900	538	37	.	.	PUNCT
fuelectenerg-900	539	1	since	since	SCONJ
fuelectenerg-900	539	2	i	i	NOUN
fuelectenerg-900	539	3	and	and	CCONJ
fuelectenerg-900	539	4	j	j	X
fuelectenerg-900	539	5	(	(	PUNCT
fuelectenerg-900	539	6	ij	ij	X
fuelectenerg-900	539	7	)	)	PUNCT
fuelectenerg-900	539	8	are	be	AUX
fuelectenerg-900	539	9	statistically	statistically	ADV
fuelectenerg-900	539	10	independent	independent	ADJ
fuelectenerg-900	539	11	,	,	PUNCT
fuelectenerg-900	539	12	s	s	NOUN
fuelectenerg-900	539	13	is	be	AUX
fuelectenerg-900	539	14	a	a	DET
fuelectenerg-900	539	15	diagonal	diagonal	ADJ
fuelectenerg-900	539	16	nn	nn	NOUN
fuelectenerg-900	539	17	matrix	matrix	NOUN
fuelectenerg-900	539	18	of	of	ADP
fuelectenerg-900	539	19	elements	element	NOUN
fuelectenerg-900	539	20	sii	sii	PROPN
fuelectenerg-900	539	21	=	=	PROPN
fuelectenerg-900	539	22	si	si	X
fuelectenerg-900	539	23	.	.	PUNCT
fuelectenerg-900	540	1	i	i	PRON
fuelectenerg-900	540	2	is	be	AUX
fuelectenerg-900	540	3	the	the	DET
fuelectenerg-900	540	4	unity	unity	NOUN
fuelectenerg-900	540	5	nn	nn	NOUN
fuelectenerg-900	540	6	matrix	matrix	NOUN
fuelectenerg-900	540	7	,	,	PUNCT
fuelectenerg-900	540	8	ω=2π.	ω=2π.	NOUN
fuelectenerg-900	540	9	rf	rf	NOUN
fuelectenerg-900	540	10	mems	mem	NOUN
fuelectenerg-900	540	11	/	/	SYM
fuelectenerg-900	540	12	nems	nem	NOUN
fuelectenerg-900	540	13	resonators	resonator	NOUN
fuelectenerg-900	540	14	for	for	ADP
fuelectenerg-900	540	15	wireless	wireless	ADJ
fuelectenerg-900	540	16	communication	communication	NOUN
fuelectenerg-900	540	17	systems	system	NOUN
fuelectenerg-900	540	18	and	and	CCONJ
fuelectenerg-900	540	19	adsorption	adsorption	NOUN
fuelectenerg-900	540	20	-	-	PUNCT
fuelectenerg-900	540	21	desorption	desorption	NOUN
fuelectenerg-900	540	22	phase	phase	NOUN
fuelectenerg-900	540	23	noise	noise	NOUN
fuelectenerg-900	540	24	371	371	NUM
fuelectenerg-900	540	25	the	the	DET
fuelectenerg-900	540	26	total	total	ADJ
fuelectenerg-900	540	27	fluctuation	fluctuation	NOUN
fuelectenerg-900	540	28	of	of	ADP
fuelectenerg-900	540	29	the	the	DET
fuelectenerg-900	540	30	adsorbed	adsorb	VERB
fuelectenerg-900	540	31	mass	mass	NOUN
fuelectenerg-900	540	32	is	be	AUX
fuelectenerg-900	540	33	δm	δm	PROPN
fuelectenerg-900	540	34	=	=	PROPN
fuelectenerg-900	540	35	m1n1+m2n2+	m1n1+m2n2+	NOUN
fuelectenerg-900	540	36	…	…	SYM
fuelectenerg-900	540	37	+mnnn	+mnnn	PROPN
fuelectenerg-900	540	38	,	,	PUNCT
fuelectenerg-900	540	39	where	where	SCONJ
fuelectenerg-900	540	40	mi	mi	PROPN
fuelectenerg-900	540	41	is	be	AUX
fuelectenerg-900	540	42	the	the	DET
fuelectenerg-900	540	43	mass	mass	NOUN
fuelectenerg-900	540	44	of	of	ADP
fuelectenerg-900	540	45	a	a	DET
fuelectenerg-900	540	46	single	single	ADJ
fuelectenerg-900	540	47	particle	particle	NOUN
fuelectenerg-900	540	48	of	of	ADP
fuelectenerg-900	540	49	the	the	DET
fuelectenerg-900	540	50	type	type	NOUN
fuelectenerg-900	540	51	i	i	PRON
fuelectenerg-900	540	52	(	(	PUNCT
fuelectenerg-900	540	53	number	number	NOUN
fuelectenerg-900	540	54	of	of	ADP
fuelectenerg-900	540	55	such	such	ADJ
fuelectenerg-900	540	56	particles	particle	NOUN
fuelectenerg-900	540	57	at	at	ADP
fuelectenerg-900	540	58	the	the	DET
fuelectenerg-900	540	59	surface	surface	NOUN
fuelectenerg-900	540	60	is	be	AUX
fuelectenerg-900	540	61	ni	ni	PROPN
fuelectenerg-900	540	62	)	)	PUNCT
fuelectenerg-900	540	63	.	.	PUNCT
fuelectenerg-900	541	1	the	the	DET
fuelectenerg-900	541	2	psd	psd	PROPN
fuelectenerg-900	541	3	of	of	ADP
fuelectenerg-900	541	4	adsorbed	adsorb	VERB
fuelectenerg-900	541	5	mass	mass	NOUN
fuelectenerg-900	541	6	fluctuations	fluctuation	NOUN
fuelectenerg-900	541	7	is	be	AUX
fuelectenerg-900	541	8	t	t	NOUN
fuelectenerg-900	541	9	n	n	NUM
fuelectenerg-900	541	10	msm	msm	NOUN
fuelectenerg-900	541	11			PROPN
fuelectenerg-900	541	12			ADV
fuelectenerg-900	541	13	)	)	PUNCT
fuelectenerg-900	542	1	ω()ω	ω()ω	PROPN
fuelectenerg-900	542	2	(	(	PUNCT
fuelectenerg-900	542	3	2,nms	2,nms	NUM
fuelectenerg-900	542	4	(	(	PUNCT
fuelectenerg-900	542	5	11	11	NUM
fuelectenerg-900	542	6	)	)	PUNCT
fuelectenerg-900	542	7	(	(	PUNCT
fuelectenerg-900	542	8	m=[m1	m=[m1	PROPN
fuelectenerg-900	542	9	m2	m2	PROPN
fuelectenerg-900	542	10	...	...	PUNCT
fuelectenerg-900	542	11	mn	mn	PROPN
fuelectenerg-900	542	12	]	]	PUNCT
fuelectenerg-900	542	13	)	)	PUNCT
fuelectenerg-900	542	14	and	and	CCONJ
fuelectenerg-900	542	15	it	it	PRON
fuelectenerg-900	542	16	can	can	AUX
fuelectenerg-900	542	17	be	be	AUX
fuelectenerg-900	542	18	expressed	express	VERB
fuelectenerg-900	542	19	in	in	ADP
fuelectenerg-900	542	20	the	the	DET
fuelectenerg-900	542	21	general	general	ADJ
fuelectenerg-900	542	22	form	form	NOUN
fuelectenerg-900	542	23			PROPN
fuelectenerg-900	542	24			PROPN
fuelectenerg-900	543	1			NOUN
fuelectenerg-900	544	1			PROPN
fuelectenerg-900	544	2			PROPN
fuelectenerg-900	544	3			PROPN
fuelectenerg-900	545	1			PROPN
fuelectenerg-900	545	2			NOUN
fuelectenerg-900	545	3			PROPN
fuelectenerg-900	546	1			PROPN
fuelectenerg-900	547	1			PROPN
fuelectenerg-900	548	1			NOUN
fuelectenerg-900	549	1			PROPN
fuelectenerg-900	549	2			PROPN
fuelectenerg-900	549	3			PROPN
fuelectenerg-900	550	1			PROPN
fuelectenerg-900	550	2			NOUN
fuelectenerg-900	550	3			PROPN
fuelectenerg-900	550	4			ADJ
fuelectenerg-900	550	5			PROPN
fuelectenerg-900	550	6			PROPN
fuelectenerg-900	550	7			NUM
fuelectenerg-900	550	8			PUNCT
fuelectenerg-900	551	1	n	n	CCONJ
fuelectenerg-900	551	2	i	i	PRON
fuelectenerg-900	552	1	i	i	PRON
fuelectenerg-900	553	1	n	n	VERB
fuelectenerg-900	554	1	i	i	PRON
fuelectenerg-900	554	2	i	i	PRON
fuelectenerg-900	554	3	inm	inm	VERB
fuelectenerg-900	554	4	ks	ks	PROPN
fuelectenerg-900	554	5	1	1	NUM
fuelectenerg-900	554	6	22	22	NUM
fuelectenerg-900	554	7	1	1	NUM
fuelectenerg-900	554	8	0	0	NUM
fuelectenerg-900	554	9	2	2	NUM
fuelectenerg-900	554	10	,	,	PUNCT
fuelectenerg-900	554	11	)	)	PUNCT
fuelectenerg-900	554	12	1(/	1(/	NUM
fuelectenerg-900	554	13	)	)	PUNCT
fuelectenerg-900	554	14	(	(	PUNCT
fuelectenerg-900	554	15			NOUN
fuelectenerg-900	554	16	(	(	PUNCT
fuelectenerg-900	554	17	12	12	NUM
fuelectenerg-900	554	18	)	)	PUNCT
fuelectenerg-900	554	19	coefficients	coefficient	NOUN
fuelectenerg-900	554	20	ki	ki	PROPN
fuelectenerg-900	554	21	and	and	CCONJ
fuelectenerg-900	554	22	τi	τi	PROPN
fuelectenerg-900	554	23	are	be	AUX
fuelectenerg-900	554	24	obtained	obtain	VERB
fuelectenerg-900	554	25	analytically	analytically	ADV
fuelectenerg-900	554	26	for	for	ADP
fuelectenerg-900	554	27	the	the	DET
fuelectenerg-900	554	28	given	give	VERB
fuelectenerg-900	554	29	case	case	NOUN
fuelectenerg-900	554	30	of	of	ADP
fuelectenerg-900	554	31	adsorption	adsorption	NOUN
fuelectenerg-900	554	32	.	.	PUNCT
fuelectenerg-900	555	1	the	the	DET
fuelectenerg-900	555	2	resonator	resonator	NOUN
fuelectenerg-900	555	3	ad	ad	NOUN
fuelectenerg-900	555	4	phase	phase	NOUN
fuelectenerg-900	555	5	and	and	CCONJ
fuelectenerg-900	555	6	frequency	frequency	NOUN
fuelectenerg-900	555	7	noise	noise	NOUN
fuelectenerg-900	555	8	are	be	AUX
fuelectenerg-900	555	9	now	now	ADV
fuelectenerg-900	555	10	obtained	obtain	VERB
fuelectenerg-900	555	11	using	use	VERB
fuelectenerg-900	555	12	eq	eq	ADP
fuelectenerg-900	555	13	.	.	PUNCT
fuelectenerg-900	556	1	(	(	PUNCT
fuelectenerg-900	556	2	6	6	NUM
fuelectenerg-900	556	3	)	)	PUNCT
fuelectenerg-900	556	4	,	,	PUNCT
fuelectenerg-900	556	5	where	where	SCONJ
fuelectenerg-900	556	6	sδm(	sδm(	ADJ
fuelectenerg-900	556	7	)	)	PUNCT
fuelectenerg-900	556	8	is	be	AUX
fuelectenerg-900	556	9	given	give	VERB
fuelectenerg-900	556	10	by	by	ADP
fuelectenerg-900	556	11	eq	eq	PROPN
fuelectenerg-900	556	12	.	.	PUNCT
fuelectenerg-900	557	1	(	(	PUNCT
fuelectenerg-900	557	2	11	11	NUM
fuelectenerg-900	557	3	)	)	PUNCT
fuelectenerg-900	557	4	or	or	CCONJ
fuelectenerg-900	557	5	(	(	PUNCT
fuelectenerg-900	557	6	12	12	NUM
fuelectenerg-900	557	7	)	)	PUNCT
fuelectenerg-900	557	8	.	.	PUNCT
fuelectenerg-900	558	1	in	in	ADP
fuelectenerg-900	558	2	order	order	NOUN
fuelectenerg-900	558	3	to	to	PART
fuelectenerg-900	558	4	illustrate	illustrate	VERB
fuelectenerg-900	558	5	the	the	DET
fuelectenerg-900	558	6	applications	application	NOUN
fuelectenerg-900	558	7	of	of	ADP
fuelectenerg-900	558	8	the	the	DET
fuelectenerg-900	558	9	presented	present	VERB
fuelectenerg-900	558	10	approach	approach	NOUN
fuelectenerg-900	558	11	,	,	PUNCT
fuelectenerg-900	558	12	the	the	DET
fuelectenerg-900	558	13	results	result	NOUN
fuelectenerg-900	558	14	obtained	obtain	VERB
fuelectenerg-900	558	15	for	for	ADP
fuelectenerg-900	558	16	several	several	ADJ
fuelectenerg-900	558	17	characteristic	characteristic	ADJ
fuelectenerg-900	558	18	cases	case	NOUN
fuelectenerg-900	558	19	of	of	ADP
fuelectenerg-900	558	20	adsorption	adsorption	NOUN
fuelectenerg-900	558	21	will	will	AUX
fuelectenerg-900	558	22	be	be	AUX
fuelectenerg-900	558	23	given	give	VERB
fuelectenerg-900	558	24	.	.	PUNCT
fuelectenerg-900	559	1	for	for	ADP
fuelectenerg-900	559	2	example	example	NOUN
fuelectenerg-900	559	3	,	,	PUNCT
fuelectenerg-900	559	4	in	in	ADP
fuelectenerg-900	559	5	the	the	DET
fuelectenerg-900	559	6	case	case	NOUN
fuelectenerg-900	559	7	of	of	ADP
fuelectenerg-900	559	8	single	single	ADJ
fuelectenerg-900	559	9	gas	gas	NOUN
fuelectenerg-900	559	10	single	single	ADJ
fuelectenerg-900	559	11	-	-	PUNCT
fuelectenerg-900	559	12	layer	layer	NOUN
fuelectenerg-900	559	13	adsorption	adsorption	NOUN
fuelectenerg-900	559	14	[	[	X
fuelectenerg-900	559	15	113	113	NUM
fuelectenerg-900	559	16	,	,	PUNCT
fuelectenerg-900	559	17	115	115	NUM
fuelectenerg-900	559	18	,	,	PUNCT
fuelectenerg-900	559	19	123	123	NUM
fuelectenerg-900	559	20	]	]	SYM
fuelectenerg-900	559	21	2	2	NUM
fuelectenerg-900	559	22	1	1	NUM
fuelectenerg-900	559	23	2	2	NUM
fuelectenerg-900	559	24	2	2	NUM
fuelectenerg-900	559	25	111	111	NUM
fuelectenerg-900	559	26	2	2	NUM
fuelectenerg-900	559	27	1	1	NUM
fuelectenerg-900	559	28	1	1	NUM
fuelectenerg-900	559	29	,	,	PUNCT
fuelectenerg-900	559	30	τ)πν2(1	τ)πν2(1	NOUN
fuelectenerg-900	559	31	τ)(4	τ)(4	PUNCT
fuelectenerg-900	559	32	)	)	PUNCT
fuelectenerg-900	559	33	ν	ν	X
fuelectenerg-900	559	34	(	(	PUNCT
fuelectenerg-900	559	35			VERB
fuelectenerg-900	559	36			NOUN
fuelectenerg-900	559	37	ee	ee	ADP
fuelectenerg-900	559	38	m	m	PROPN
fuelectenerg-900	559	39	ngm	ngm	PROPN
fuelectenerg-900	559	40	s	s	PROPN
fuelectenerg-900	559	41	(	(	PUNCT
fuelectenerg-900	559	42	13	13	NUM
fuelectenerg-900	559	43	)	)	PUNCT
fuelectenerg-900	559	44	where	where	SCONJ
fuelectenerg-900	559	45	τ1=1	τ1=1	PROPN
fuelectenerg-900	559	46	/	/	SYM
fuelectenerg-900	559	47	k11=-(g1e/n1-r1e/n1	k11=-(g1e/n1-r1e/n1	NOUN
fuelectenerg-900	559	48	)	)	PUNCT
fuelectenerg-900	559	49	-1	-1	PUNCT
fuelectenerg-900	559	50	n1	n1	NOUN
fuelectenerg-900	559	51	=	=	SYM
fuelectenerg-900	559	52	n1e	n1e	NOUN
fuelectenerg-900	559	53	,	,	PUNCT
fuelectenerg-900	559	54	and	and	CCONJ
fuelectenerg-900	559	55	n1e	n1e	NOUN
fuelectenerg-900	559	56	is	be	AUX
fuelectenerg-900	559	57	obtained	obtain	VERB
fuelectenerg-900	559	58	from	from	ADP
fuelectenerg-900	559	59	the	the	DET
fuelectenerg-900	559	60	steady	steady	ADJ
fuelectenerg-900	559	61	state	state	NOUN
fuelectenerg-900	559	62	condition	condition	NOUN
fuelectenerg-900	559	63	g1e(n1e)=r1e(n1e	g1e(n1e)=r1e(n1e	PROPN
fuelectenerg-900	559	64	)	)	PUNCT
fuelectenerg-900	559	65	.	.	PUNCT
fuelectenerg-900	560	1	considering	consider	VERB
fuelectenerg-900	560	2	the	the	DET
fuelectenerg-900	560	3	mass	mass	NOUN
fuelectenerg-900	560	4	transfer	transfer	NOUN
fuelectenerg-900	560	5	process	process	NOUN
fuelectenerg-900	560	6	,	,	PUNCT
fuelectenerg-900	560	7	the	the	DET
fuelectenerg-900	560	8	psd	psd	NOUN
fuelectenerg-900	560	9	of	of	ADP
fuelectenerg-900	560	10	the	the	DET
fuelectenerg-900	560	11	adsorbed	adsorb	VERB
fuelectenerg-900	560	12	mass	mass	NOUN
fuelectenerg-900	560	13	fluctuations	fluctuation	NOUN
fuelectenerg-900	560	14	for	for	ADP
fuelectenerg-900	560	15	single	single	ADJ
fuelectenerg-900	560	16	gas	gas	NOUN
fuelectenerg-900	560	17	single	single	ADJ
fuelectenerg-900	560	18	-	-	PUNCT
fuelectenerg-900	560	19	layer	layer	NOUN
fuelectenerg-900	560	20	case	case	NOUN
fuelectenerg-900	560	21	is	be	AUX
fuelectenerg-900	560	22	also	also	ADV
fuelectenerg-900	560	23	given	give	VERB
fuelectenerg-900	560	24	by	by	ADP
fuelectenerg-900	560	25	eq	eq	PROPN
fuelectenerg-900	560	26	.	.	PUNCT
fuelectenerg-900	561	1	(	(	PUNCT
fuelectenerg-900	561	2	13	13	NUM
fuelectenerg-900	561	3	)	)	PUNCT
fuelectenerg-900	561	4	,	,	PUNCT
fuelectenerg-900	561	5	with	with	ADP
fuelectenerg-900	561	6	τ1,mt	τ1,mt	NOUN
fuelectenerg-900	561	7	=	=	SYM
fuelectenerg-900	561	8	τ1(1+g1eert/(akmp	τ1(1+g1eert/(akmp	NUM
fuelectenerg-900	561	9	)	)	PUNCT
fuelectenerg-900	561	10	)	)	PUNCT
fuelectenerg-900	561	11	instead	instead	ADV
fuelectenerg-900	561	12	of	of	ADP
fuelectenerg-900	561	13	τ1	τ1	NOUN
fuelectenerg-900	561	14	(	(	PUNCT
fuelectenerg-900	561	15	p	p	NOUN
fuelectenerg-900	561	16	is	be	AUX
fuelectenerg-900	561	17	the	the	DET
fuelectenerg-900	561	18	gas	gas	NOUN
fuelectenerg-900	561	19	pressure	pressure	NOUN
fuelectenerg-900	561	20	,	,	PUNCT
fuelectenerg-900	561	21	t	t	PROPN
fuelectenerg-900	561	22	is	be	AUX
fuelectenerg-900	561	23	the	the	DET
fuelectenerg-900	561	24	temperature	temperature	NOUN
fuelectenerg-900	561	25	,	,	PUNCT
fuelectenerg-900	561	26	a	a	PRON
fuelectenerg-900	561	27	is	be	AUX
fuelectenerg-900	561	28	the	the	DET
fuelectenerg-900	561	29	resonator	resonator	NOUN
fuelectenerg-900	561	30	surface	surface	NOUN
fuelectenerg-900	561	31	area	area	NOUN
fuelectenerg-900	561	32	,	,	PUNCT
fuelectenerg-900	561	33	and	and	CCONJ
fuelectenerg-900	561	34	km	km	NOUN
fuelectenerg-900	561	35	is	be	AUX
fuelectenerg-900	561	36	the	the	DET
fuelectenerg-900	561	37	mass	mass	ADJ
fuelectenerg-900	561	38	transfer	transfer	NOUN
fuelectenerg-900	561	39	coefficient	coefficient	NOUN
fuelectenerg-900	561	40	)	)	PUNCT
fuelectenerg-900	562	1	[	[	X
fuelectenerg-900	562	2	118	118	NUM
fuelectenerg-900	562	3	]	]	PUNCT
fuelectenerg-900	562	4	.	.	PUNCT
fuelectenerg-900	563	1	mass	mass	ADJ
fuelectenerg-900	563	2	transfer	transfer	NOUN
fuelectenerg-900	563	3	processes	process	NOUN
fuelectenerg-900	563	4	of	of	ADP
fuelectenerg-900	563	5	particles	particle	NOUN
fuelectenerg-900	563	6	in	in	ADP
fuelectenerg-900	563	7	a	a	DET
fuelectenerg-900	563	8	resonator	resonator	NOUN
fuelectenerg-900	563	9	chamber	chamber	NOUN
fuelectenerg-900	563	10	can	can	AUX
fuelectenerg-900	563	11	influence	influence	VERB
fuelectenerg-900	563	12	the	the	DET
fuelectenerg-900	563	13	fluctuations	fluctuation	NOUN
fuelectenerg-900	563	14	of	of	ADP
fuelectenerg-900	563	15	the	the	DET
fuelectenerg-900	563	16	number	number	NOUN
fuelectenerg-900	563	17	of	of	ADP
fuelectenerg-900	563	18	adsorbed	adsorb	VERB
fuelectenerg-900	563	19	particles	particle	NOUN
fuelectenerg-900	563	20	,	,	PUNCT
fuelectenerg-900	563	21	especially	especially	ADV
fuelectenerg-900	563	22	for	for	ADP
fuelectenerg-900	563	23	low	low	ADJ
fuelectenerg-900	563	24	-	-	PUNCT
fuelectenerg-900	563	25	pressure	pressure	NOUN
fuelectenerg-900	563	26	(	(	PUNCT
fuelectenerg-900	563	27	low	low	ADJ
fuelectenerg-900	563	28	-	-	PUNCT
fuelectenerg-900	563	29	concentration	concentration	NOUN
fuelectenerg-900	563	30	)	)	PUNCT
fuelectenerg-900	563	31	environments	environment	NOUN
fuelectenerg-900	563	32	[	[	X
fuelectenerg-900	563	33	118	118	NUM
fuelectenerg-900	563	34	]	]	PUNCT
fuelectenerg-900	563	35	.	.	PUNCT
fuelectenerg-900	564	1	for	for	ADP
fuelectenerg-900	564	2	the	the	DET
fuelectenerg-900	564	3	resonator	resonator	NOUN
fuelectenerg-900	564	4	operating	operate	VERB
fuelectenerg-900	564	5	in	in	ADP
fuelectenerg-900	564	6	a	a	DET
fuelectenerg-900	564	7	two	two	NUM
fuelectenerg-900	564	8	-	-	PUNCT
fuelectenerg-900	564	9	gas	gas	NOUN
fuelectenerg-900	564	10	atmosphere	atmosphere	NOUN
fuelectenerg-900	564	11	(	(	PUNCT
fuelectenerg-900	564	12	the	the	DET
fuelectenerg-900	564	13	simplest	simple	ADJ
fuelectenerg-900	564	14	case	case	NOUN
fuelectenerg-900	564	15	of	of	ADP
fuelectenerg-900	564	16	multiple	multiple	ADJ
fuelectenerg-900	564	17	gas	gas	NOUN
fuelectenerg-900	564	18	adsorption	adsorption	NOUN
fuelectenerg-900	564	19	)	)	PUNCT
fuelectenerg-900	564	20	,	,	PUNCT
fuelectenerg-900	564	21	the	the	DET
fuelectenerg-900	564	22	psd	psd	NOUN
fuelectenerg-900	564	23	of	of	ADP
fuelectenerg-900	564	24	the	the	DET
fuelectenerg-900	564	25	mass	mass	NOUN
fuelectenerg-900	564	26	adsorbed	adsorb	VERB
fuelectenerg-900	564	27	in	in	ADP
fuelectenerg-900	564	28	a	a	DET
fuelectenerg-900	564	29	single	single	ADJ
fuelectenerg-900	564	30	layer	layer	NOUN
fuelectenerg-900	564	31	is	be	AUX
fuelectenerg-900	564	32	[	[	X
fuelectenerg-900	564	33	116	116	NUM
fuelectenerg-900	564	34	,	,	PUNCT
fuelectenerg-900	564	35	117	117	NUM
fuelectenerg-900	564	36	]	]	PUNCT
fuelectenerg-900	564	37	)	)	PUNCT
fuelectenerg-900	564	38	τω1)(τω1	τω1)(τω1	PROPN
fuelectenerg-900	564	39	(	(	PUNCT
fuelectenerg-900	564	40	)	)	PUNCT
fuelectenerg-900	564	41	τω1	τω1	X
fuelectenerg-900	564	42	)	)	PUNCT
fuelectenerg-900	564	43	(	(	PUNCT
fuelectenerg-900	564	44	(	(	PUNCT
fuelectenerg-900	564	45	τ	τ	X
fuelectenerg-900	564	46	ττ	ττ	PROPN
fuelectenerg-900	564	47	4)ω	4)ω	PROPN
fuelectenerg-900	564	48	(	(	PUNCT
fuelectenerg-900	564	49	2	2	NUM
fuelectenerg-900	564	50	2	2	NUM
fuelectenerg-900	564	51	22	22	NUM
fuelectenerg-900	564	52	1	1	NUM
fuelectenerg-900	564	53	2	2	NUM
fuelectenerg-900	564	54	22	22	NUM
fuelectenerg-900	564	55	2	2	NUM
fuelectenerg-900	564	56	2	2	NUM
fuelectenerg-900	564	57	21	21	NUM
fuelectenerg-900	564	58	2	2	NUM
fuelectenerg-900	564	59	1	1	NUM
fuelectenerg-900	564	60	2	2	NUM
fuelectenerg-900	564	61	2	2	NUM
fuelectenerg-900	564	62	2	2	NUM
fuelectenerg-900	564	63	2	2	NUM
fuelectenerg-900	564	64	1	1	NUM
fuelectenerg-900	564	65	2	2	NUM
fuelectenerg-900	564	66	,	,	PUNCT
fuelectenerg-900	564	67			ADJ
fuelectenerg-900	564	68			ADJ
fuelectenerg-900	564	69			NOUN
fuelectenerg-900	564	70	zeeee	zeeee	NOUN
fuelectenerg-900	564	71	z	z	PROPN
fuelectenerg-900	564	72	m	m	VERB
fuelectenerg-900	564	73	gmgm	gmgm	NOUN
fuelectenerg-900	564	74	s	s	PROPN
fuelectenerg-900	564	75	(	(	PUNCT
fuelectenerg-900	564	76	14	14	NUM
fuelectenerg-900	564	77	)	)	PUNCT
fuelectenerg-900	564	78	where	where	SCONJ
fuelectenerg-900	564	79	τ1,2=2{k11+k22±[(k11+k22	τ1,2=2{k11+k22±[(k11+k22	NOUN
fuelectenerg-900	564	80	)	)	PUNCT
fuelectenerg-900	564	81	2	2	NUM
fuelectenerg-900	564	82	-4(k11k22	-4(k11k22	ADJ
fuelectenerg-900	564	83	-	-	PUNCT
fuelectenerg-900	564	84	k12k21	k12k21	NOUN
fuelectenerg-900	564	85	)	)	PUNCT
fuelectenerg-900	564	86	]	]	PUNCT
fuelectenerg-900	565	1	1/2	1/2	NUM
fuelectenerg-900	565	2	}	}	PUNCT
fuelectenerg-900	565	3	-1	-1	PUNCT
fuelectenerg-900	565	4	,	,	PUNCT
fuelectenerg-900	565	5	τz=(m1	τz=(m1	NOUN
fuelectenerg-900	565	6	2	2	NUM
fuelectenerg-900	565	7	g1ee+m2	g1ee+m2	NOUN
fuelectenerg-900	565	8	2	2	NUM
fuelectenerg-900	565	9	g2ee)[(m1k22m2k21	g2ee)[(m1k22m2k21	NOUN
fuelectenerg-900	565	10	)	)	PUNCT
fuelectenerg-900	565	11	2	2	NUM
fuelectenerg-900	565	12	g1ee+(m1k11	g1ee+(m1k11	NOUN
fuelectenerg-900	565	13	-	-	PUNCT
fuelectenerg-900	565	14	m2k12	m2k12	NOUN
fuelectenerg-900	565	15	)	)	PUNCT
fuelectenerg-900	565	16	2	2	NUM
fuelectenerg-900	565	17	g2ee	g2ee	X
fuelectenerg-900	565	18	)	)	PUNCT
fuelectenerg-900	565	19	]	]	PUNCT
fuelectenerg-900	565	20	-1	-1	PUNCT
fuelectenerg-900	565	21	.	.	PUNCT
fuelectenerg-900	566	1	the	the	DET
fuelectenerg-900	566	2	same	same	ADJ
fuelectenerg-900	566	3	expression	expression	NOUN
fuelectenerg-900	566	4	is	be	AUX
fuelectenerg-900	566	5	valid	valid	ADJ
fuelectenerg-900	566	6	in	in	ADP
fuelectenerg-900	566	7	the	the	DET
fuelectenerg-900	566	8	case	case	NOUN
fuelectenerg-900	566	9	of	of	ADP
fuelectenerg-900	566	10	two	two	NUM
fuelectenerg-900	566	11	-	-	PUNCT
fuelectenerg-900	566	12	layer	layer	NOUN
fuelectenerg-900	566	13	adsorption	adsorption	NOUN
fuelectenerg-900	566	14	,	,	PUNCT
fuelectenerg-900	566	15	but	but	CCONJ
fuelectenerg-900	566	16	τ1,2	τ1,2	ADJ
fuelectenerg-900	566	17	and	and	CCONJ
fuelectenerg-900	566	18	τz	τz	PART
fuelectenerg-900	566	19	depend	depend	VERB
fuelectenerg-900	566	20	on	on	ADP
fuelectenerg-900	566	21	different	different	ADJ
fuelectenerg-900	566	22	parameters	parameter	NOUN
fuelectenerg-900	566	23	because	because	SCONJ
fuelectenerg-900	566	24	the	the	DET
fuelectenerg-900	566	25	functions	function	NOUN
fuelectenerg-900	566	26	gie	gie	NOUN
fuelectenerg-900	566	27	and	and	CCONJ
fuelectenerg-900	566	28	rie	rie	NOUN
fuelectenerg-900	566	29	are	be	AUX
fuelectenerg-900	566	30	different	different	ADJ
fuelectenerg-900	566	31	[	[	X
fuelectenerg-900	566	32	120	120	NUM
fuelectenerg-900	566	33	]	]	PUNCT
fuelectenerg-900	566	34	.	.	PUNCT
fuelectenerg-900	567	1	3.2	3.2	NUM
fuelectenerg-900	567	2	.	.	PUNCT
fuelectenerg-900	567	3	phase	phase	NOUN
fuelectenerg-900	567	4	noise	noise	NOUN
fuelectenerg-900	567	5	in	in	ADP
fuelectenerg-900	567	6	rf	rf	NOUN
fuelectenerg-900	567	7	mems	mem	NOUN
fuelectenerg-900	567	8	/	/	SYM
fuelectenerg-900	567	9	nems	nem	NOUN
fuelectenerg-900	567	10	oscillators	oscillator	VERB
fuelectenerg-900	567	11	oscillators	oscillator	NOUN
fuelectenerg-900	567	12	,	,	PUNCT
fuelectenerg-900	567	13	which	which	PRON
fuelectenerg-900	567	14	produce	produce	VERB
fuelectenerg-900	567	15	continuous	continuous	ADJ
fuelectenerg-900	567	16	periodic	periodic	ADJ
fuelectenerg-900	567	17	signals	signal	NOUN
fuelectenerg-900	567	18	from	from	ADP
fuelectenerg-900	567	19	dc	dc	PROPN
fuelectenerg-900	567	20	power	power	NOUN
fuelectenerg-900	567	21	,	,	PUNCT
fuelectenerg-900	567	22	are	be	AUX
fuelectenerg-900	567	23	important	important	ADJ
fuelectenerg-900	567	24	for	for	ADP
fuelectenerg-900	567	25	modern	modern	ADJ
fuelectenerg-900	567	26	communications	communication	NOUN
fuelectenerg-900	567	27	systems	system	NOUN
fuelectenerg-900	567	28	,	,	PUNCT
fuelectenerg-900	567	29	due	due	ADP
fuelectenerg-900	567	30	to	to	ADP
fuelectenerg-900	567	31	their	their	PRON
fuelectenerg-900	567	32	versatile	versatile	ADJ
fuelectenerg-900	567	33	applications	application	NOUN
fuelectenerg-900	567	34	including	include	VERB
fuelectenerg-900	567	35	timing	timing	NOUN
fuelectenerg-900	567	36	references	reference	NOUN
fuelectenerg-900	567	37	and	and	CCONJ
fuelectenerg-900	567	38	frequency	frequency	NOUN
fuelectenerg-900	567	39	synthesizers	synthesizer	NOUN
fuelectenerg-900	567	40	.	.	PUNCT
fuelectenerg-900	568	1	the	the	DET
fuelectenerg-900	568	2	effects	effect	NOUN
fuelectenerg-900	568	3	of	of	ADP
fuelectenerg-900	568	4	oscillator	oscillator	NOUN
fuelectenerg-900	568	5	phase	phase	NOUN
fuelectenerg-900	568	6	noise	noise	NOUN
fuelectenerg-900	568	7	become	become	VERB
fuelectenerg-900	568	8	increasingly	increasingly	ADV
fuelectenerg-900	568	9	destructive	destructive	ADJ
fuelectenerg-900	568	10	with	with	ADP
fuelectenerg-900	568	11	the	the	DET
fuelectenerg-900	568	12	introduction	introduction	NOUN
fuelectenerg-900	568	13	of	of	ADP
fuelectenerg-900	568	14	new	new	ADJ
fuelectenerg-900	568	15	wireless	wireless	NOUN
fuelectenerg-900	568	16	standards	standard	NOUN
fuelectenerg-900	568	17	based	base	VERB
fuelectenerg-900	568	18	on	on	ADP
fuelectenerg-900	568	19	advanced	advanced	ADJ
fuelectenerg-900	568	20	modulation	modulation	NOUN
fuelectenerg-900	568	21	schemes	scheme	NOUN
fuelectenerg-900	568	22	[	[	X
fuelectenerg-900	568	23	125	125	NUM
fuelectenerg-900	568	24	]	]	PUNCT
fuelectenerg-900	568	25	,	,	PUNCT
fuelectenerg-900	568	26	which	which	PRON
fuelectenerg-900	568	27	makes	make	VERB
fuelectenerg-900	568	28	modeling	modeling	NOUN
fuelectenerg-900	568	29	of	of	ADP
fuelectenerg-900	568	30	rf	rf	NOUN
fuelectenerg-900	568	31	oscillators	oscillator	NOUN
fuelectenerg-900	568	32	phase	phase	NOUN
fuelectenerg-900	568	33	372	372	NUM
fuelectenerg-900	568	34	i.	i.	NOUN
fuelectenerg-900	568	35	jokić	jokić	PROPN
fuelectenerg-900	568	36	,	,	PUNCT
fuelectenerg-900	568	37	m.	m.	NOUN
fuelectenerg-900	568	38	frantlović	frantlović	NOUN
fuelectenerg-900	568	39	,	,	PUNCT
fuelectenerg-900	568	40	z.	z.	PROPN
fuelectenerg-900	568	41	djurić	djurić	PROPN
fuelectenerg-900	568	42	,	,	PUNCT
fuelectenerg-900	568	43	m.	m.	NOUN
fuelectenerg-900	568	44	l.	l.	PROPN
fuelectenerg-900	568	45	dukić	dukić	PROPN
fuelectenerg-900	568	46	noise	noise	NOUN
fuelectenerg-900	568	47	in	in	ADP
fuelectenerg-900	568	48	modern	modern	ADJ
fuelectenerg-900	568	49	wireless	wireless	ADJ
fuelectenerg-900	568	50	communication	communication	NOUN
fuelectenerg-900	568	51	systems	system	NOUN
fuelectenerg-900	568	52	very	very	ADV
fuelectenerg-900	568	53	useful	useful	ADJ
fuelectenerg-900	568	54	.	.	PUNCT
fuelectenerg-900	569	1	therefore	therefore	ADV
fuelectenerg-900	569	2	,	,	PUNCT
fuelectenerg-900	569	3	the	the	DET
fuelectenerg-900	569	4	theory	theory	NOUN
fuelectenerg-900	569	5	of	of	ADP
fuelectenerg-900	569	6	phase	phase	NOUN
fuelectenerg-900	569	7	noise	noise	NOUN
fuelectenerg-900	569	8	is	be	AUX
fuelectenerg-900	569	9	being	be	AUX
fuelectenerg-900	569	10	constantly	constantly	ADV
fuelectenerg-900	569	11	improved	improve	VERB
fuelectenerg-900	569	12	[	[	X
fuelectenerg-900	569	13	125	125	NUM
fuelectenerg-900	569	14	,	,	PUNCT
fuelectenerg-900	569	15	126	126	NUM
fuelectenerg-900	569	16	]	]	PUNCT
fuelectenerg-900	569	17	.	.	PUNCT
fuelectenerg-900	570	1	a	a	DET
fuelectenerg-900	570	2	signal	signal	NOUN
fuelectenerg-900	570	3	generated	generate	VERB
fuelectenerg-900	570	4	by	by	ADP
fuelectenerg-900	570	5	a	a	DET
fuelectenerg-900	570	6	real	real	ADJ
fuelectenerg-900	570	7	oscillator	oscillator	NOUN
fuelectenerg-900	570	8	can	can	AUX
fuelectenerg-900	570	9	be	be	AUX
fuelectenerg-900	570	10	expressed	express	VERB
fuelectenerg-900	570	11	by	by	ADP
fuelectenerg-900	570	12	u(t)=a02	u(t)=a02	PROPN
fuelectenerg-900	570	13	-1/2	-1/2	PROPN
fuelectenerg-900	570	14	e	e	NOUN
fuelectenerg-900	570	15	j2πf0	j2πf0	NOUN
fuelectenerg-900	570	16	t	t	PROPN
fuelectenerg-900	570	17	e	e	X
fuelectenerg-900	570	18	j(t	j(t	PROPN
fuelectenerg-900	570	19	)	)	PUNCT
fuelectenerg-900	570	20	,	,	PUNCT
fuelectenerg-900	570	21	where	where	SCONJ
fuelectenerg-900	570	22	a0	a0	PROPN
fuelectenerg-900	570	23	is	be	AUX
fuelectenerg-900	570	24	the	the	DET
fuelectenerg-900	570	25	amplitude	amplitude	NOUN
fuelectenerg-900	570	26	(	(	PUNCT
fuelectenerg-900	570	27	usually	usually	ADV
fuelectenerg-900	570	28	considered	consider	VERB
fuelectenerg-900	570	29	as	as	ADP
fuelectenerg-900	570	30	constant	constant	ADJ
fuelectenerg-900	570	31	[	[	X
fuelectenerg-900	570	32	125	125	NUM
fuelectenerg-900	570	33	]	]	PUNCT
fuelectenerg-900	570	34	)	)	PUNCT
fuelectenerg-900	570	35	,	,	PUNCT
fuelectenerg-900	570	36	f0	f0	PROPN
fuelectenerg-900	570	37	is	be	AUX
fuelectenerg-900	570	38	the	the	DET
fuelectenerg-900	570	39	carrier	carrier	NOUN
fuelectenerg-900	570	40	frequency	frequency	NOUN
fuelectenerg-900	570	41	,	,	PUNCT
fuelectenerg-900	570	42	and	and	CCONJ
fuelectenerg-900	570	43	(t	(t	NOUN
fuelectenerg-900	570	44	)	)	PUNCT
fuelectenerg-900	570	45	is	be	AUX
fuelectenerg-900	570	46	the	the	DET
fuelectenerg-900	570	47	resulting	result	VERB
fuelectenerg-900	570	48	stochastic	stochastic	ADJ
fuelectenerg-900	570	49	fluctuation	fluctuation	NOUN
fuelectenerg-900	570	50	of	of	ADP
fuelectenerg-900	570	51	the	the	DET
fuelectenerg-900	570	52	phase	phase	NOUN
fuelectenerg-900	570	53	,	,	PUNCT
fuelectenerg-900	570	54	caused	cause	VERB
fuelectenerg-900	570	55	by	by	ADP
fuelectenerg-900	570	56	noise	noise	NOUN
fuelectenerg-900	570	57	generating	generating	NOUN
fuelectenerg-900	570	58	mechanisms	mechanism	NOUN
fuelectenerg-900	570	59	in	in	ADP
fuelectenerg-900	570	60	the	the	DET
fuelectenerg-900	570	61	oscillator	oscillator	NOUN
fuelectenerg-900	570	62	constituting	constitute	VERB
fuelectenerg-900	570	63	components	component	NOUN
fuelectenerg-900	570	64	.	.	PUNCT
fuelectenerg-900	571	1	the	the	DET
fuelectenerg-900	571	2	spectrum	spectrum	NOUN
fuelectenerg-900	571	3	of	of	ADP
fuelectenerg-900	571	4	the	the	DET
fuelectenerg-900	571	5	signal	signal	NOUN
fuelectenerg-900	571	6	u(t	u(t	NOUN
fuelectenerg-900	571	7	)	)	PUNCT
fuelectenerg-900	571	8	is	be	AUX
fuelectenerg-900	571	9	located	locate	VERB
fuelectenerg-900	571	10	around	around	ADP
fuelectenerg-900	571	11	the	the	DET
fuelectenerg-900	571	12	frequency	frequency	NOUN
fuelectenerg-900	571	13	f	f	X
fuelectenerg-900	571	14	=	=	X
fuelectenerg-900	571	15	f0	f0	ADJ
fuelectenerg-900	571	16	,	,	PUNCT
fuelectenerg-900	571	17	and	and	CCONJ
fuelectenerg-900	571	18	shaped	shape	VERB
fuelectenerg-900	571	19	by	by	ADP
fuelectenerg-900	571	20	(t)=e	(t)=e	PROPN
fuelectenerg-900	571	21	j(t	j(t	PROPN
fuelectenerg-900	571	22	)	)	PUNCT
fuelectenerg-900	571	23	.	.	PUNCT
fuelectenerg-900	572	1	therefore	therefore	ADV
fuelectenerg-900	572	2	,	,	PUNCT
fuelectenerg-900	572	3	when	when	SCONJ
fuelectenerg-900	572	4	considering	consider	VERB
fuelectenerg-900	572	5	only	only	ADV
fuelectenerg-900	572	6	the	the	DET
fuelectenerg-900	572	7	spectrum	spectrum	NOUN
fuelectenerg-900	572	8	shape	shape	NOUN
fuelectenerg-900	572	9	,	,	PUNCT
fuelectenerg-900	572	10	it	it	PRON
fuelectenerg-900	572	11	is	be	AUX
fuelectenerg-900	572	12	convenient	convenient	ADJ
fuelectenerg-900	572	13	to	to	PART
fuelectenerg-900	572	14	analyze	analyze	VERB
fuelectenerg-900	572	15	the	the	DET
fuelectenerg-900	572	16	spectrum	spectrum	NOUN
fuelectenerg-900	572	17	translated	translate	VERB
fuelectenerg-900	572	18	to	to	ADP
fuelectenerg-900	572	19	the	the	DET
fuelectenerg-900	572	20	baseband	baseband	NOUN
fuelectenerg-900	572	21	,	,	PUNCT
fuelectenerg-900	572	22	which	which	PRON
fuelectenerg-900	572	23	is	be	AUX
fuelectenerg-900	572	24	then	then	ADV
fuelectenerg-900	572	25	the	the	DET
fuelectenerg-900	572	26	spectrum	spectrum	NOUN
fuelectenerg-900	572	27	of	of	ADP
fuelectenerg-900	572	28	(t	(t	NOUN
fuelectenerg-900	572	29	)	)	PUNCT
fuelectenerg-900	572	30	.	.	PUNCT
fuelectenerg-900	573	1	if	if	SCONJ
fuelectenerg-900	573	2	the	the	DET
fuelectenerg-900	573	3	psd	psd	NOUN
fuelectenerg-900	573	4	of	of	ADP
fuelectenerg-900	573	5	(t	(t	NOUN
fuelectenerg-900	573	6	)	)	PUNCT
fuelectenerg-900	573	7	is	be	AUX
fuelectenerg-900	573	8	denoted	denote	VERB
fuelectenerg-900	573	9	with	with	ADP
fuelectenerg-900	573	10	s(	s(	PROPN
fuelectenerg-900	573	11	)	)	PUNCT
fuelectenerg-900	573	12	,	,	PUNCT
fuelectenerg-900	573	13	the	the	DET
fuelectenerg-900	573	14	oscillator	oscillator	NOUN
fuelectenerg-900	573	15	phase	phase	NOUN
fuelectenerg-900	573	16	noise	noise	NOUN
fuelectenerg-900	573	17	(	(	PUNCT
fuelectenerg-900	573	18	expressed	express	VERB
fuelectenerg-900	573	19	in	in	ADP
fuelectenerg-900	573	20	dbc	dbc	PROPN
fuelectenerg-900	573	21	/	/	SYM
fuelectenerg-900	573	22	hz	hz	PROPN
fuelectenerg-900	573	23	)	)	PUNCT
fuelectenerg-900	573	24	is	be	AUX
fuelectenerg-900	573	25	[	[	X
fuelectenerg-900	573	26	125	125	NUM
fuelectenerg-900	573	27	]	]	PUNCT
fuelectenerg-900	573	28	)	)	PUNCT
fuelectenerg-900	573	29	)	)	PUNCT
fuelectenerg-900	574	1	ν(log(10)ν	ν(log(10)ν	NOUN
fuelectenerg-900	574	2	(	(	PUNCT
fuelectenerg-900	574	3	θslosc	θslosc	NOUN
fuelectenerg-900	574	4			PRON
fuelectenerg-900	574	5	(	(	PUNCT
fuelectenerg-900	574	6	15	15	NUM
fuelectenerg-900	574	7	)	)	PUNCT
fuelectenerg-900	574	8	(	(	PUNCT
fuelectenerg-900	574	9			INTJ
fuelectenerg-900	574	10	is	be	AUX
fuelectenerg-900	574	11	the	the	DET
fuelectenerg-900	574	12	fourier	fourier	ADJ
fuelectenerg-900	574	13	frequency	frequency	NOUN
fuelectenerg-900	574	14	)	)	PUNCT
fuelectenerg-900	574	15	.	.	PUNCT
fuelectenerg-900	575	1	s(	s(	PROPN
fuelectenerg-900	575	2	)	)	PUNCT
fuelectenerg-900	575	3	is	be	AUX
fuelectenerg-900	575	4	obtained	obtain	VERB
fuelectenerg-900	575	5	by	by	ADP
fuelectenerg-900	575	6	using	use	VERB
fuelectenerg-900	575	7	the	the	DET
fuelectenerg-900	575	8	wiener	wiener	NOUN
fuelectenerg-900	575	9	-	-	PUNCT
fuelectenerg-900	575	10	khinchin	khinchin	NOUN
fuelectenerg-900	575	11	theorem	theorem	ADJ
fuelectenerg-900	575	12			ADJ
fuelectenerg-900	575	13			PROPN
fuelectenerg-900	575	14			NOUN
fuelectenerg-900	575	15			NOUN
fuelectenerg-900	575	16			VERB
fuelectenerg-900	575	17			NOUN
fuelectenerg-900	575	18			NOUN
fuelectenerg-900	575	19			PROPN
fuelectenerg-900	575	20	ττ)τ()ν	ττ)τ()ν	PROPN
fuelectenerg-900	575	21	(	(	PUNCT
fuelectenerg-900	575	22	πντ22/)τ(σπντ2	πντ22/)τ(σπντ2	VERB
fuelectenerg-900	575	23	θθ	θθ	NOUN
fuelectenerg-900	575	24	2	2	NUM
fuelectenerg-900	575	25	deeders	deeder	NOUN
fuelectenerg-900	575	26	jj	jj	PROPN
fuelectenerg-900	575	27	(	(	PUNCT
fuelectenerg-900	575	28	16	16	NUM
fuelectenerg-900	575	29	)	)	PUNCT
fuelectenerg-900	575	30	where	where	SCONJ
fuelectenerg-900	575	31	r(	r(	PROPN
fuelectenerg-900	575	32	)	)	PUNCT
fuelectenerg-900	575	33	is	be	AUX
fuelectenerg-900	575	34	the	the	DET
fuelectenerg-900	575	35	autocorrelation	autocorrelation	NOUN
fuelectenerg-900	575	36	function	function	NOUN
fuelectenerg-900	575	37	of	of	ADP
fuelectenerg-900	575	38	(t	(t	NOUN
fuelectenerg-900	575	39	)	)	PUNCT
fuelectenerg-900	575	40	,	,	PUNCT
fuelectenerg-900	575	41	and	and	CCONJ
fuelectenerg-900	575	42	2	2	ADP
fuelectenerg-900	575	43	(	(	NUM
fuelectenerg-900	575	44	)	)	PUNCT
fuelectenerg-900	575	45	is	be	AUX
fuelectenerg-900	575	46	the	the	DET
fuelectenerg-900	575	47	phase	phase	NOUN
fuelectenerg-900	575	48	jitter	jitter	NOUN
fuelectenerg-900	575	49	variance	variance	NOUN
fuelectenerg-900	575	50	(	(	PUNCT
fuelectenerg-900	575	51	the	the	DET
fuelectenerg-900	575	52	variance	variance	NOUN
fuelectenerg-900	575	53	of	of	ADP
fuelectenerg-900	575	54	the	the	DET
fuelectenerg-900	575	55	phase	phase	NOUN
fuelectenerg-900	575	56	increments	increment	VERB
fuelectenerg-900	575	57	)	)	PUNCT
fuelectenerg-900	576	1	[	[	X
fuelectenerg-900	576	2	125	125	NUM
fuelectenerg-900	576	3	]	]	PUNCT
fuelectenerg-900	576	4	.	.	PUNCT
fuelectenerg-900	577	1	since	since	SCONJ
fuelectenerg-900	577	2	(t	(t	NOUN
fuelectenerg-900	577	3	)	)	PUNCT
fuelectenerg-900	577	4	is	be	AUX
fuelectenerg-900	577	5	the	the	DET
fuelectenerg-900	577	6	integration	integration	NOUN
fuelectenerg-900	577	7	result	result	NOUN
fuelectenerg-900	577	8	of	of	ADP
fuelectenerg-900	577	9	stationary	stationary	ADJ
fuelectenerg-900	577	10	frequency	frequency	NOUN
fuelectenerg-900	577	11	noise	noise	NOUN
fuelectenerg-900	577	12	,	,	PUNCT
fuelectenerg-900	577	13	the	the	DET
fuelectenerg-900	577	14	variance	variance	NOUN
fuelectenerg-900	577	15	2	2	NOUN
fuelectenerg-900	577	16	(τ	(τ	NOUN
fuelectenerg-900	577	17	)	)	PUNCT
fuelectenerg-900	577	18	is	be	AUX
fuelectenerg-900	577	19	related	relate	VERB
fuelectenerg-900	577	20	to	to	ADP
fuelectenerg-900	577	21	the	the	DET
fuelectenerg-900	577	22	psd	psd	NOUN
fuelectenerg-900	577	23	of	of	ADP
fuelectenerg-900	577	24	frequency	frequency	NOUN
fuelectenerg-900	577	25	noise	noise	NOUN
fuelectenerg-900	577	26	sf(	sf(	NOUN
fuelectenerg-900	577	27	)	)	PUNCT
fuelectenerg-900	577	28	according	accord	VERB
fuelectenerg-900	577	29	to	to	ADP
fuelectenerg-900	577	30	the	the	DET
fuelectenerg-900	577	31	expression	expression	NOUN
fuelectenerg-900	577	32	[	[	X
fuelectenerg-900	577	33	125	125	NUM
fuelectenerg-900	577	34	,	,	PUNCT
fuelectenerg-900	577	35	127	127	NUM
fuelectenerg-900	577	36	]	]	PUNCT
fuelectenerg-900	577	37			ADP
fuelectenerg-900	577	38			PROPN
fuelectenerg-900	577	39			NOUN
fuelectenerg-900	577	40			ADV
fuelectenerg-900	577	41			NUM
fuelectenerg-900	577	42	ν	ν	NOUN
fuelectenerg-900	577	43	)	)	PUNCT
fuelectenerg-900	577	44	πν	πν	PROPN
fuelectenerg-900	577	45	(	(	PUNCT
fuelectenerg-900	577	46	)	)	PUNCT
fuelectenerg-900	577	47	πντ(sin	πντ(sin	NOUN
fuelectenerg-900	577	48	)	)	PUNCT
fuelectenerg-900	577	49	ν()τ(σ	ν()τ(σ	NOUN
fuelectenerg-900	577	50	2	2	NUM
fuelectenerg-900	577	51	2	2	NUM
fuelectenerg-900	577	52	2	2	NUM
fuelectenerg-900	577	53	υ	υ	NOUN
fuelectenerg-900	577	54	ds	ds	PROPN
fuelectenerg-900	577	55	f	f	X
fuelectenerg-900	577	56	(	(	PUNCT
fuelectenerg-900	577	57	17	17	NUM
fuelectenerg-900	577	58	)	)	PUNCT
fuelectenerg-900	577	59	considering	consider	VERB
fuelectenerg-900	577	60	a	a	DET
fuelectenerg-900	577	61	mems	mem	NOUN
fuelectenerg-900	577	62	oscillator	oscillator	NOUN
fuelectenerg-900	577	63	consisting	consist	VERB
fuelectenerg-900	577	64	of	of	ADP
fuelectenerg-900	577	65	a	a	DET
fuelectenerg-900	577	66	mems	mems	ADJ
fuelectenerg-900	577	67	mechanical	mechanical	ADJ
fuelectenerg-900	577	68	resonator	resonator	NOUN
fuelectenerg-900	577	69	(	(	PUNCT
fuelectenerg-900	577	70	as	as	ADP
fuelectenerg-900	577	71	a	a	DET
fuelectenerg-900	577	72	frequency	frequency	NOUN
fuelectenerg-900	577	73	selective	selective	ADJ
fuelectenerg-900	577	74	element	element	NOUN
fuelectenerg-900	577	75	)	)	PUNCT
fuelectenerg-900	577	76	and	and	CCONJ
fuelectenerg-900	577	77	sustaining	sustain	VERB
fuelectenerg-900	577	78	electronics	electronic	NOUN
fuelectenerg-900	577	79	,	,	PUNCT
fuelectenerg-900	577	80	the	the	DET
fuelectenerg-900	577	81	total	total	ADJ
fuelectenerg-900	577	82	phase	phase	NOUN
fuelectenerg-900	577	83	fluctuations	fluctuation	NOUN
fuelectenerg-900	577	84	are	be	AUX
fuelectenerg-900	577	85	caused	cause	VERB
fuelectenerg-900	577	86	by	by	ADP
fuelectenerg-900	577	87	noise	noise	NOUN
fuelectenerg-900	577	88	generation	generation	NOUN
fuelectenerg-900	577	89	mechanisms	mechanism	NOUN
fuelectenerg-900	577	90	in	in	ADP
fuelectenerg-900	577	91	the	the	DET
fuelectenerg-900	577	92	oscillator	oscillator	NOUN
fuelectenerg-900	577	93	's	's	PART
fuelectenerg-900	577	94	electronic	electronic	ADJ
fuelectenerg-900	577	95	circuit	circuit	NOUN
fuelectenerg-900	577	96	,	,	PUNCT
fuelectenerg-900	577	97	but	but	CCONJ
fuelectenerg-900	577	98	also	also	ADV
fuelectenerg-900	577	99	by	by	ADP
fuelectenerg-900	577	100	the	the	DET
fuelectenerg-900	577	101	resonator	resonator	NOUN
fuelectenerg-900	577	102	mechanical	mechanical	ADJ
fuelectenerg-900	577	103	frequency	frequency	NOUN
fuelectenerg-900	577	104	noises	noise	NOUN
fuelectenerg-900	577	105	.	.	PUNCT
fuelectenerg-900	578	1	due	due	ADP
fuelectenerg-900	578	2	to	to	ADP
fuelectenerg-900	578	3	the	the	DET
fuelectenerg-900	578	4	noise	noise	NOUN
fuelectenerg-900	578	5	induced	induce	VERB
fuelectenerg-900	578	6	by	by	ADP
fuelectenerg-900	578	7	dissipation	dissipation	NOUN
fuelectenerg-900	578	8	processes	process	NOUN
fuelectenerg-900	578	9	in	in	ADP
fuelectenerg-900	578	10	a	a	DET
fuelectenerg-900	578	11	resonator	resonator	NOUN
fuelectenerg-900	578	12	and	and	CCONJ
fuelectenerg-900	578	13	sustaining	sustain	VERB
fuelectenerg-900	578	14	circuits	circuit	NOUN
fuelectenerg-900	578	15	(	(	PUNCT
fuelectenerg-900	578	16	called	call	VERB
fuelectenerg-900	578	17	the	the	DET
fuelectenerg-900	578	18	brownian	brownian	ADJ
fuelectenerg-900	578	19	motion	motion	NOUN
fuelectenerg-900	578	20	noise	noise	NOUN
fuelectenerg-900	578	21	,	,	PUNCT
fuelectenerg-900	578	22	or	or	CCONJ
fuelectenerg-900	578	23	white	white	ADJ
fuelectenerg-900	578	24	noise	noise	NOUN
fuelectenerg-900	578	25	)	)	PUNCT
fuelectenerg-900	578	26	,	,	PUNCT
fuelectenerg-900	578	27	the	the	DET
fuelectenerg-900	578	28	phase	phase	NOUN
fuelectenerg-900	578	29	undergoes	undergo	VERB
fuelectenerg-900	578	30	diffusion	diffusion	NOUN
fuelectenerg-900	578	31	process	process	NOUN
fuelectenerg-900	578	32	,	,	PUNCT
fuelectenerg-900	578	33	with	with	ADP
fuelectenerg-900	578	34	the	the	DET
fuelectenerg-900	578	35	diffusion	diffusion	NOUN
fuelectenerg-900	578	36	constant	constant	ADJ
fuelectenerg-900	578	37	d.	d.	PROPN
fuelectenerg-900	578	38	the	the	DET
fuelectenerg-900	578	39	omnipresent	omnipresent	NOUN
fuelectenerg-900	578	40	1	1	NUM
fuelectenerg-900	578	41	/	/	SYM
fuelectenerg-900	578	42	f	f	PROPN
fuelectenerg-900	578	43	noise	noise	NOUN
fuelectenerg-900	578	44	of	of	ADP
fuelectenerg-900	578	45	oscillator	oscillator	NOUN
fuelectenerg-900	578	46	components	component	NOUN
fuelectenerg-900	578	47	also	also	ADV
fuelectenerg-900	578	48	causes	cause	VERB
fuelectenerg-900	578	49	phase	phase	NOUN
fuelectenerg-900	578	50	fluctuations	fluctuation	NOUN
fuelectenerg-900	578	51	.	.	PUNCT
fuelectenerg-900	579	1	the	the	DET
fuelectenerg-900	579	2	corresponding	corresponding	ADJ
fuelectenerg-900	579	3	variances	variance	NOUN
fuelectenerg-900	579	4	,	,	PUNCT
fuelectenerg-900	579	5	2	2	NOUN
fuelectenerg-900	579	6	,b(	,b(	NOUN
fuelectenerg-900	579	7	)	)	PUNCT
fuelectenerg-900	579	8	and	and	CCONJ
fuelectenerg-900	579	9	2	2	ADV
fuelectenerg-900	579	10	,1	,1	ADV
fuelectenerg-900	579	11	/	/	SYM
fuelectenerg-900	579	12	f(	f(	NOUN
fuelectenerg-900	579	13	)	)	PUNCT
fuelectenerg-900	579	14	,	,	PUNCT
fuelectenerg-900	579	15	are	be	AUX
fuelectenerg-900	579	16	given	give	VERB
fuelectenerg-900	579	17	in	in	ADP
fuelectenerg-900	579	18	[	[	X
fuelectenerg-900	579	19	125	125	NUM
fuelectenerg-900	579	20	,	,	PUNCT
fuelectenerg-900	579	21	126	126	NUM
fuelectenerg-900	579	22	]	]	PUNCT
fuelectenerg-900	579	23	.	.	PUNCT
fuelectenerg-900	580	1	by	by	ADP
fuelectenerg-900	580	2	using	use	VERB
fuelectenerg-900	580	3	eq	eq	ADP
fuelectenerg-900	580	4	.	.	PUNCT
fuelectenerg-900	581	1	(	(	PUNCT
fuelectenerg-900	581	2	17	17	NUM
fuelectenerg-900	581	3	)	)	PUNCT
fuelectenerg-900	581	4	the	the	DET
fuelectenerg-900	581	5	variance	variance	NOUN
fuelectenerg-900	581	6	of	of	ADP
fuelectenerg-900	581	7	the	the	DET
fuelectenerg-900	581	8	phase	phase	NOUN
fuelectenerg-900	581	9	increments	increment	VERB
fuelectenerg-900	581	10	due	due	ADP
fuelectenerg-900	581	11	to	to	ADP
fuelectenerg-900	581	12	ad	ad	NOUN
fuelectenerg-900	581	13	noise	noise	NOUN
fuelectenerg-900	581	14	,	,	PUNCT
fuelectenerg-900	581	15	2	2	ADV
fuelectenerg-900	581	16	,ad(	,ad(	PROPN
fuelectenerg-900	581	17	)	)	PUNCT
fuelectenerg-900	581	18	,	,	PUNCT
fuelectenerg-900	581	19	can	can	AUX
fuelectenerg-900	581	20	be	be	AUX
fuelectenerg-900	581	21	obtained	obtain	VERB
fuelectenerg-900	581	22	,	,	PUNCT
fuelectenerg-900	581	23	applying	apply	VERB
fuelectenerg-900	581	24	sf()=(f0/2	sf()=(f0/2	NOUN
fuelectenerg-900	581	25	m	m	NOUN
fuelectenerg-900	581	26	)	)	PUNCT
fuelectenerg-900	581	27	2	2	NUM
fuelectenerg-900	581	28	sm(	sm(	NOUN
fuelectenerg-900	581	29	)	)	PUNCT
fuelectenerg-900	581	30	,	,	PUNCT
fuelectenerg-900	581	31	where	where	SCONJ
fuelectenerg-900	581	32	sm(	sm(	X
fuelectenerg-900	581	33	)	)	PUNCT
fuelectenerg-900	581	34	is	be	AUX
fuelectenerg-900	581	35	given	give	VERB
fuelectenerg-900	581	36	by	by	ADP
fuelectenerg-900	581	37	eq	eq	PROPN
fuelectenerg-900	581	38	.	.	PUNCT
fuelectenerg-900	582	1	(	(	PUNCT
fuelectenerg-900	582	2	12	12	NUM
fuelectenerg-900	582	3	)	)	PUNCT
fuelectenerg-900	582	4	.	.	PUNCT
fuelectenerg-900	583	1	we	we	PRON
fuelectenerg-900	583	2	determined	determine	VERB
fuelectenerg-900	583	3	the	the	DET
fuelectenerg-900	583	4	variance	variance	NOUN
fuelectenerg-900	583	5	2	2	CCONJ
fuelectenerg-900	583	6	,ad(	,ad(	PROPN
fuelectenerg-900	583	7	)	)	PUNCT
fuelectenerg-900	583	8	for	for	ADP
fuelectenerg-900	583	9	single	single	ADJ
fuelectenerg-900	583	10	gas	gas	NOUN
fuelectenerg-900	583	11	single	single	ADJ
fuelectenerg-900	583	12	-	-	PUNCT
fuelectenerg-900	583	13	layer	layer	NOUN
fuelectenerg-900	583	14	adsorption	adsorption	NOUN
fuelectenerg-900	583	15	(	(	PUNCT
fuelectenerg-900	583	16	by	by	ADP
fuelectenerg-900	583	17	using	use	VERB
fuelectenerg-900	583	18	eqs	eqs	PROPN
fuelectenerg-900	583	19	.	.	PUNCT
fuelectenerg-900	584	1	(	(	PUNCT
fuelectenerg-900	584	2	13	13	NUM
fuelectenerg-900	584	3	)	)	PUNCT
fuelectenerg-900	584	4	and	and	CCONJ
fuelectenerg-900	584	5	(	(	PUNCT
fuelectenerg-900	584	6	17	17	NUM
fuelectenerg-900	584	7	)	)	PUNCT
fuelectenerg-900	584	8	)	)	PUNCT
fuelectenerg-900	585	1	[	[	X
fuelectenerg-900	585	2	122	122	NUM
fuelectenerg-900	585	3	]	]	PUNCT
fuelectenerg-900	585	4	.	.	PUNCT
fuelectenerg-900	586	1	in	in	ADP
fuelectenerg-900	586	2	the	the	DET
fuelectenerg-900	586	3	presence	presence	NOUN
fuelectenerg-900	586	4	of	of	ADP
fuelectenerg-900	586	5	these	these	DET
fuelectenerg-900	586	6	noises	noise	NOUN
fuelectenerg-900	586	7	the	the	DET
fuelectenerg-900	586	8	corresponding	correspond	VERB
fuelectenerg-900	586	9	variances	variance	NOUN
fuelectenerg-900	586	10	are	be	AUX
fuelectenerg-900	586	11	τ2)τ(σ	τ2)τ(σ	PROPN
fuelectenerg-900	586	12	υ	υ	NOUN
fuelectenerg-900	586	13	2	2	NUM
fuelectenerg-900	586	14	,	,	PUNCT
fuelectenerg-900	586	15	υ	υ	PRON
fuelectenerg-900	586	16	db	db	ADJ
fuelectenerg-900	586	17			NOUN
fuelectenerg-900	586	18	,	,	PUNCT
fuelectenerg-900	586	19	22	22	NUM
fuelectenerg-900	586	20	/1,υ	/1,υ	PUNCT
fuelectenerg-900	587	1	τ)τ(σ	τ)τ(σ	NOUN
fuelectenerg-900	587	2	kf	kf	PROPN
fuelectenerg-900	587	3			NOUN
fuelectenerg-900	587	4	,	,	PUNCT
fuelectenerg-900	587	5	2/)]1(ττ[)τ(σ	2/)]1(ττ[)τ(σ	NUM
fuelectenerg-900	587	6	1τ	1τ	NUM
fuelectenerg-900	587	7	/	/	SYM
fuelectenerg-900	587	8	τ	τ	PROPN
fuelectenerg-900	587	9	1	1	NUM
fuelectenerg-900	587	10	2	2	NUM
fuelectenerg-900	587	11	,	,	PUNCT
fuelectenerg-900	587	12	υ	υ	DET
fuelectenerg-900	587	13			NOUN
fuelectenerg-900	587	14			NOUN
fuelectenerg-900	587	15			NUM
fuelectenerg-900	587	16	epad	epad	NOUN
fuelectenerg-900	587	17	(	(	PUNCT
fuelectenerg-900	587	18	18	18	NUM
fuelectenerg-900	587	19	)	)	PUNCT
fuelectenerg-900	587	20	where	where	SCONJ
fuelectenerg-900	587	21	k	k	PROPN
fuelectenerg-900	587	22	is	be	AUX
fuelectenerg-900	587	23	related	relate	VERB
fuelectenerg-900	587	24	to	to	ADP
fuelectenerg-900	587	25	parameters	parameter	NOUN
fuelectenerg-900	587	26	of	of	ADP
fuelectenerg-900	587	27	the	the	DET
fuelectenerg-900	587	28	1	1	NUM
fuelectenerg-900	587	29	/	/	SYM
fuelectenerg-900	587	30	f	f	PROPN
fuelectenerg-900	587	31	noise	noise	NOUN
fuelectenerg-900	587	32	in	in	ADP
fuelectenerg-900	587	33	an	an	DET
fuelectenerg-900	587	34	oscillator	oscillator	NOUN
fuelectenerg-900	587	35	circuit	circuit	NOUN
fuelectenerg-900	587	36	,	,	PUNCT
fuelectenerg-900	587	37	and	and	CCONJ
fuelectenerg-900	587	38	p	p	X
fuelectenerg-900	587	39	=	=	NOUN
fuelectenerg-900	587	40	g1e(n1e)1	g1e(n1e)1	ADP
fuelectenerg-900	587	41	2	2	NUM
fuelectenerg-900	587	42	m1	m1	NOUN
fuelectenerg-900	587	43	2	2	NUM
fuelectenerg-900	587	44	(	(	PUNCT
fuelectenerg-900	587	45	f0/2	f0/2	NOUN
fuelectenerg-900	587	46	m	m	NOUN
fuelectenerg-900	587	47	)	)	PUNCT
fuelectenerg-900	587	48	2	2	NUM
fuelectenerg-900	587	49	.	.	PUNCT
fuelectenerg-900	588	1	assuming	assume	VERB
fuelectenerg-900	588	2	that	that	SCONJ
fuelectenerg-900	588	3	mentioned	mention	VERB
fuelectenerg-900	588	4	noise	noise	NOUN
fuelectenerg-900	588	5	sources	source	NOUN
fuelectenerg-900	588	6	are	be	AUX
fuelectenerg-900	588	7	not	not	PART
fuelectenerg-900	588	8	correlated	correlate	VERB
fuelectenerg-900	588	9	,	,	PUNCT
fuelectenerg-900	588	10	the	the	DET
fuelectenerg-900	588	11	total	total	ADJ
fuelectenerg-900	588	12	variance	variance	NOUN
fuelectenerg-900	588	13	equals	equal	VERB
fuelectenerg-900	588	14	the	the	DET
fuelectenerg-900	588	15	sum	sum	NOUN
fuelectenerg-900	588	16	of	of	ADP
fuelectenerg-900	588	17	the	the	DET
fuelectenerg-900	588	18	components	component	NOUN
fuelectenerg-900	588	19	that	that	PRON
fuelectenerg-900	588	20	correspond	correspond	VERB
fuelectenerg-900	588	21	to	to	ADP
fuelectenerg-900	588	22	each	each	PRON
fuelectenerg-900	588	23	of	of	ADP
fuelectenerg-900	588	24	the	the	DET
fuelectenerg-900	588	25	frequency	frequency	NOUN
fuelectenerg-900	588	26	noise	noise	NOUN
fuelectenerg-900	588	27	sources	source	NOUN
fuelectenerg-900	588	28	.	.	PUNCT
fuelectenerg-900	589	1	the	the	DET
fuelectenerg-900	589	2	corresponding	corresponding	ADJ
fuelectenerg-900	589	3	total	total	ADJ
fuelectenerg-900	589	4	autocorrelation	autocorrelation	NOUN
fuelectenerg-900	589	5	function	function	NOUN
fuelectenerg-900	589	6	equals	equal	VERB
fuelectenerg-900	589	7	the	the	DET
fuelectenerg-900	589	8	product	product	NOUN
fuelectenerg-900	589	9	of	of	ADP
fuelectenerg-900	589	10	the	the	DET
fuelectenerg-900	589	11	autocorrelation	autocorrelation	NOUN
fuelectenerg-900	589	12	functions	function	NOUN
fuelectenerg-900	589	13	of	of	ADP
fuelectenerg-900	589	14	all	all	DET
fuelectenerg-900	589	15	noise	noise	NOUN
fuelectenerg-900	589	16	contributors	contributor	NOUN
fuelectenerg-900	589	17	.	.	PUNCT
fuelectenerg-900	590	1	the	the	DET
fuelectenerg-900	590	2	individual	individual	ADJ
fuelectenerg-900	590	3	spectra	spectra	NOUN
fuelectenerg-900	590	4	are	be	AUX
fuelectenerg-900	590	5	denoted	denote	VERB
fuelectenerg-900	590	6	with	with	ADP
fuelectenerg-900	590	7	s,b(	s,b(	NOUN
fuelectenerg-900	590	8	)	)	PUNCT
fuelectenerg-900	590	9	,	,	PUNCT
fuelectenerg-900	590	10	s,1	s,1	NOUN
fuelectenerg-900	590	11	/	/	SYM
fuelectenerg-900	590	12	f(	f(	PROPN
fuelectenerg-900	590	13	)	)	PUNCT
fuelectenerg-900	590	14	and	and	CCONJ
fuelectenerg-900	590	15	s,ad(	s,ad(	NOUN
fuelectenerg-900	590	16	)	)	PUNCT
fuelectenerg-900	590	17	,	,	PUNCT
fuelectenerg-900	590	18	and	and	CCONJ
fuelectenerg-900	590	19	they	they	PRON
fuelectenerg-900	590	20	are	be	AUX
fuelectenerg-900	590	21	obtained	obtain	VERB
fuelectenerg-900	590	22	using	use	VERB
fuelectenerg-900	590	23	eqs	eqs	PROPN
fuelectenerg-900	590	24	.	.	PUNCT
fuelectenerg-900	591	1	(	(	PUNCT
fuelectenerg-900	591	2	16	16	NUM
fuelectenerg-900	591	3	)	)	PUNCT
fuelectenerg-900	591	4	and	and	CCONJ
fuelectenerg-900	591	5	(	(	PUNCT
fuelectenerg-900	591	6	18	18	NUM
fuelectenerg-900	591	7	)	)	PUNCT
fuelectenerg-900	591	8	.	.	PUNCT
fuelectenerg-900	592	1	the	the	DET
fuelectenerg-900	592	2	rf	rf	NOUN
fuelectenerg-900	592	3	mems	mem	NOUN
fuelectenerg-900	592	4	/	/	SYM
fuelectenerg-900	592	5	nems	nem	NOUN
fuelectenerg-900	592	6	resonators	resonator	NOUN
fuelectenerg-900	592	7	for	for	ADP
fuelectenerg-900	592	8	wireless	wireless	ADJ
fuelectenerg-900	592	9	communication	communication	NOUN
fuelectenerg-900	592	10	systems	system	NOUN
fuelectenerg-900	592	11	and	and	CCONJ
fuelectenerg-900	592	12	adsorption	adsorption	NOUN
fuelectenerg-900	592	13	-	-	PUNCT
fuelectenerg-900	592	14	desorption	desorption	NOUN
fuelectenerg-900	592	15	phase	phase	NOUN
fuelectenerg-900	592	16	noise	noise	NOUN
fuelectenerg-900	592	17	373	373	NUM
fuelectenerg-900	592	18	psd	psd	NOUN
fuelectenerg-900	592	19	of	of	ADP
fuelectenerg-900	592	20	(t	(t	NOUN
fuelectenerg-900	592	21	)	)	PUNCT
fuelectenerg-900	592	22	,	,	PUNCT
fuelectenerg-900	592	23	i.e.	i.e.	X
fuelectenerg-900	592	24	s(	s(	PROPN
fuelectenerg-900	592	25	)	)	PUNCT
fuelectenerg-900	592	26	,	,	PUNCT
fuelectenerg-900	592	27	is	be	AUX
fuelectenerg-900	592	28	the	the	DET
fuelectenerg-900	592	29	convolution	convolution	NOUN
fuelectenerg-900	592	30	of	of	ADP
fuelectenerg-900	592	31	the	the	DET
fuelectenerg-900	592	32	individual	individual	ADJ
fuelectenerg-900	592	33	power	power	NOUN
fuelectenerg-900	592	34	spectra	spectra	NOUN
fuelectenerg-900	592	35	in	in	ADP
fuelectenerg-900	592	36	the	the	DET
fuelectenerg-900	592	37	frequency	frequency	NOUN
fuelectenerg-900	592	38	domain	domain	NOUN
fuelectenerg-900	592	39	.	.	PUNCT
fuelectenerg-900	593	1	the	the	DET
fuelectenerg-900	593	2	oscillator	oscillator	NOUN
fuelectenerg-900	593	3	phase	phase	NOUN
fuelectenerg-900	593	4	noise	noise	NOUN
fuelectenerg-900	593	5	,	,	PUNCT
fuelectenerg-900	593	6	which	which	PRON
fuelectenerg-900	593	7	includes	include	VERB
fuelectenerg-900	593	8	the	the	DET
fuelectenerg-900	593	9	influence	influence	NOUN
fuelectenerg-900	593	10	of	of	ADP
fuelectenerg-900	593	11	the	the	DET
fuelectenerg-900	593	12	resonator	resonator	NOUN
fuelectenerg-900	593	13	ad	ad	NOUN
fuelectenerg-900	593	14	noise	noise	NOUN
fuelectenerg-900	593	15	,	,	PUNCT
fuelectenerg-900	593	16	is	be	AUX
fuelectenerg-900	593	17	then	then	ADV
fuelectenerg-900	593	18	obtained	obtain	VERB
fuelectenerg-900	593	19	from	from	ADP
fuelectenerg-900	593	20	eq	eq	PROPN
fuelectenerg-900	593	21	.	.	PUNCT
fuelectenerg-900	594	1	(	(	PUNCT
fuelectenerg-900	594	2	15	15	NUM
fuelectenerg-900	594	3	)	)	PUNCT
fuelectenerg-900	594	4	.	.	PUNCT
fuelectenerg-900	595	1	the	the	DET
fuelectenerg-900	595	2	component	component	NOUN
fuelectenerg-900	595	3	which	which	PRON
fuelectenerg-900	595	4	represents	represent	VERB
fuelectenerg-900	595	5	the	the	DET
fuelectenerg-900	595	6	contribution	contribution	NOUN
fuelectenerg-900	595	7	of	of	ADP
fuelectenerg-900	595	8	the	the	DET
fuelectenerg-900	595	9	lorentzian	lorentzian	ADJ
fuelectenerg-900	595	10	ad	ad	NOUN
fuelectenerg-900	595	11	frequency	frequency	NOUN
fuelectenerg-900	595	12	noise	noise	NOUN
fuelectenerg-900	595	13	of	of	ADP
fuelectenerg-900	595	14	the	the	DET
fuelectenerg-900	595	15	resonator	resonator	NOUN
fuelectenerg-900	595	16	to	to	ADP
fuelectenerg-900	595	17	the	the	DET
fuelectenerg-900	595	18	oscillator	oscillator	NOUN
fuelectenerg-900	595	19	's	's	PART
fuelectenerg-900	595	20	total	total	ADJ
fuelectenerg-900	595	21	phase	phase	NOUN
fuelectenerg-900	595	22	noise	noise	NOUN
fuelectenerg-900	595	23	is	be	AUX
fuelectenerg-900	595	24	[	[	X
fuelectenerg-900	595	25	122	122	NUM
fuelectenerg-900	595	26	]	]	PUNCT
fuelectenerg-900	595	27			PROPN
fuelectenerg-900	596	1			INTJ
fuelectenerg-900	596	2			PROPN
fuelectenerg-900	597	1			INTJ
fuelectenerg-900	597	2			NUM
fuelectenerg-900	597	3			ADP
fuelectenerg-900	598	1			NUM
fuelectenerg-900	598	2			X
fuelectenerg-900	599	1			INTJ
fuelectenerg-900	600	1			PROPN
fuelectenerg-900	601	1			INTJ
fuelectenerg-900	602	1			NUM
fuelectenerg-900	602	2			NOUN
fuelectenerg-900	603	1			NUM
fuelectenerg-900	603	2			PUNCT
fuelectenerg-900	603	3			PROPN
fuelectenerg-900	603	4	)	)	PUNCT
fuelectenerg-900	603	5	,	,	PUNCT
fuelectenerg-900	603	6	(	(	PUNCT
fuelectenerg-900	603	7	γreτ2reτ2)ν	γreτ2reτ2)ν	ADJ
fuelectenerg-900	603	8	(	(	PUNCT
fuelectenerg-900	603	9	1	1	NUM
fuelectenerg-900	603	10	0	0	NUM
fuelectenerg-900	603	11	1	1	NUM
fuelectenerg-900	603	12	1,θ	1,θ	NUM
fuelectenerg-900	603	13	az	az	NOUN
fuelectenerg-900	603	14	a	a	DET
fuelectenerg-900	603	15	e	e	PROPN
fuelectenerg-900	603	16	dtet	dtet	NOUN
fuelectenerg-900	603	17	a	a	DET
fuelectenerg-900	603	18	e	e	X
fuelectenerg-900	603	19	s	s	NOUN
fuelectenerg-900	603	20	z	z	NOUN
fuelectenerg-900	603	21	aa	aa	NOUN
fuelectenerg-900	604	1	tz	tz	PROPN
fuelectenerg-900	604	2	z	z	NOUN
fuelectenerg-900	604	3	a	a	DET
fuelectenerg-900	604	4	ad	ad	NOUN
fuelectenerg-900	604	5	(	(	PUNCT
fuelectenerg-900	604	6	19	19	NUM
fuelectenerg-900	604	7	)	)	PUNCT
fuelectenerg-900	604	8	where	where	SCONJ
fuelectenerg-900	604	9	(z	(z	SYM
fuelectenerg-900	604	10	,	,	PUNCT
fuelectenerg-900	604	11	a	a	PRON
fuelectenerg-900	604	12	)	)	PUNCT
fuelectenerg-900	604	13	is	be	AUX
fuelectenerg-900	604	14	the	the	DET
fuelectenerg-900	604	15	lower	low	ADJ
fuelectenerg-900	604	16	incomplete	incomplete	ADJ
fuelectenerg-900	604	17	gamma	gamma	NOUN
fuelectenerg-900	604	18	function	function	NOUN
fuelectenerg-900	604	19	,	,	PUNCT
fuelectenerg-900	604	20	a	a	DET
fuelectenerg-900	604	21	=	=	X
fuelectenerg-900	604	22	pτ1/4	pτ1/4	PROPN
fuelectenerg-900	604	23	,	,	PUNCT
fuelectenerg-900	604	24	and	and	CCONJ
fuelectenerg-900	604	25	z	z	NOUN
fuelectenerg-900	604	26	=	=	NOUN
fuelectenerg-900	604	27	pτ1/4+jωτ	pτ1/4+jωτ	NOUN
fuelectenerg-900	604	28	,	,	PUNCT
fuelectenerg-900	604	29	ω=2π.	ω=2π.	NOUN
fuelectenerg-900	604	30	3.3	3.3	NUM
fuelectenerg-900	604	31	.	.	PUNCT
fuelectenerg-900	605	1	results	result	NOUN
fuelectenerg-900	605	2	of	of	ADP
fuelectenerg-900	605	3	numerical	numerical	ADJ
fuelectenerg-900	605	4	calculations	calculation	NOUN
fuelectenerg-900	605	5	and	and	CCONJ
fuelectenerg-900	605	6	discussion	discussion	NOUN
fuelectenerg-900	605	7	by	by	ADP
fuelectenerg-900	605	8	applying	apply	VERB
fuelectenerg-900	605	9	the	the	DET
fuelectenerg-900	605	10	derived	derive	VERB
fuelectenerg-900	605	11	theoretic	theoretic	NOUN
fuelectenerg-900	605	12	model	model	NOUN
fuelectenerg-900	605	13	,	,	PUNCT
fuelectenerg-900	605	14	we	we	PRON
fuelectenerg-900	605	15	analyzed	analyze	VERB
fuelectenerg-900	605	16	single	single	ADJ
fuelectenerg-900	605	17	layer	layer	NOUN
fuelectenerg-900	605	18	adsorption	adsorption	NOUN
fuelectenerg-900	605	19	on	on	ADP
fuelectenerg-900	605	20	the	the	DET
fuelectenerg-900	605	21	surface	surface	NOUN
fuelectenerg-900	605	22	of	of	ADP
fuelectenerg-900	605	23	mems	mem	NOUN
fuelectenerg-900	605	24	/	/	SYM
fuelectenerg-900	605	25	nems	nems	PROPN
fuelectenerg-900	605	26	silicon	silicon	NOUN
fuelectenerg-900	605	27	resonator	resonator	NOUN
fuelectenerg-900	605	28	with	with	ADP
fuelectenerg-900	605	29	the	the	DET
fuelectenerg-900	605	30	nominal	nominal	ADJ
fuelectenerg-900	605	31	resonance	resonance	NOUN
fuelectenerg-900	605	32	frequency	frequency	NOUN
fuelectenerg-900	605	33	of	of	ADP
fuelectenerg-900	605	34	50	50	NUM
fuelectenerg-900	605	35	mhz	mhz	NOUN
fuelectenerg-900	605	36	(	(	PUNCT
fuelectenerg-900	605	37	m=8.18·10	m=8.18·10	NOUN
fuelectenerg-900	605	38	-16	-16	PROPN
fuelectenerg-900	605	39	kg	kg	PROPN
fuelectenerg-900	605	40	,	,	PUNCT
fuelectenerg-900	605	41	a=8.89·10	a=8.89·10	NOUN
fuelectenerg-900	605	42	-12	-12	NOUN
fuelectenerg-900	605	43	m	m	VERB
fuelectenerg-900	605	44	2	2	NUM
fuelectenerg-900	605	45	)	)	PUNCT
fuelectenerg-900	605	46	.	.	PUNCT
fuelectenerg-900	606	1	fig	fig	NOUN
fuelectenerg-900	606	2	.	.	PUNCT
fuelectenerg-900	607	1	7a	7a	NUM
fuelectenerg-900	607	2	shows	show	VERB
fuelectenerg-900	607	3	the	the	DET
fuelectenerg-900	607	4	dependence	dependence	NOUN
fuelectenerg-900	607	5	of	of	ADP
fuelectenerg-900	607	6	the	the	DET
fuelectenerg-900	607	7	resonator	resonator	NOUN
fuelectenerg-900	607	8	ad	ad	NOUN
fuelectenerg-900	607	9	phase	phase	NOUN
fuelectenerg-900	607	10	noise	noise	NOUN
fuelectenerg-900	607	11	(	(	PUNCT
fuelectenerg-900	607	12	lr()=10log(0.5(f0/2	lr()=10log(0.5(f0/2	PROPN
fuelectenerg-900	607	13	m	m	NOUN
fuelectenerg-900	607	14	)	)	PUNCT
fuelectenerg-900	607	15	2	2	NUM
fuelectenerg-900	607	16	sm()/2	sm()/2	NUM
fuelectenerg-900	607	17	)	)	PUNCT
fuelectenerg-900	608	1	[	[	X
fuelectenerg-900	608	2	123	123	NUM
fuelectenerg-900	608	3	]	]	PUNCT
fuelectenerg-900	608	4	)	)	PUNCT
fuelectenerg-900	608	5	on	on	ADP
fuelectenerg-900	608	6	the	the	DET
fuelectenerg-900	608	7	pressure	pressure	NOUN
fuelectenerg-900	608	8	of	of	ADP
fuelectenerg-900	608	9	the	the	DET
fuelectenerg-900	608	10	gas	gas	NOUN
fuelectenerg-900	608	11	inside	inside	ADP
fuelectenerg-900	608	12	the	the	DET
fuelectenerg-900	608	13	resonator	resonator	NOUN
fuelectenerg-900	608	14	's	's	PART
fuelectenerg-900	608	15	housing	housing	NOUN
fuelectenerg-900	608	16	,	,	PUNCT
fuelectenerg-900	608	17	at	at	ADP
fuelectenerg-900	608	18	various	various	ADJ
fuelectenerg-900	608	19	offset	offset	NOUN
fuelectenerg-900	608	20	frequencies	frequency	NOUN
fuelectenerg-900	608	21	from	from	ADP
fuelectenerg-900	608	22	the	the	DET
fuelectenerg-900	608	23	nominal	nominal	ADJ
fuelectenerg-900	608	24	,	,	PUNCT
fuelectenerg-900	608	25	at	at	ADP
fuelectenerg-900	608	26	t=300	t=300	NUM
fuelectenerg-900	608	27	k	k	NOUN
fuelectenerg-900	608	28	,	,	PUNCT
fuelectenerg-900	608	29	for	for	ADP
fuelectenerg-900	608	30	the	the	DET
fuelectenerg-900	608	31	case	case	NOUN
fuelectenerg-900	608	32	of	of	ADP
fuelectenerg-900	608	33	the	the	DET
fuelectenerg-900	608	34	resonator	resonator	NOUN
fuelectenerg-900	608	35	operating	operate	VERB
fuelectenerg-900	608	36	in	in	ADP
fuelectenerg-900	608	37	a	a	DET
fuelectenerg-900	608	38	single	single	ADJ
fuelectenerg-900	608	39	gas	gas	NOUN
fuelectenerg-900	608	40	atmosphere	atmosphere	NOUN
fuelectenerg-900	608	41	.	.	PUNCT
fuelectenerg-900	609	1	the	the	DET
fuelectenerg-900	609	2	gas	gas	NOUN
fuelectenerg-900	609	3	is	be	AUX
fuelectenerg-900	609	4	nitrogen	nitrogen	NOUN
fuelectenerg-900	609	5	[	[	X
fuelectenerg-900	609	6	123	123	NUM
fuelectenerg-900	609	7	]	]	PUNCT
fuelectenerg-900	609	8	.	.	PUNCT
fuelectenerg-900	610	1	it	it	PRON
fuelectenerg-900	610	2	can	can	AUX
fuelectenerg-900	610	3	be	be	AUX
fuelectenerg-900	610	4	observed	observe	VERB
fuelectenerg-900	610	5	that	that	SCONJ
fuelectenerg-900	610	6	this	this	DET
fuelectenerg-900	610	7	noise	noise	NOUN
fuelectenerg-900	610	8	has	have	VERB
fuelectenerg-900	610	9	a	a	DET
fuelectenerg-900	610	10	low	low	ADJ
fuelectenerg-900	610	11	magnitude	magnitude	NOUN
fuelectenerg-900	610	12	at	at	ADP
fuelectenerg-900	610	13	near	near	ADJ
fuelectenerg-900	610	14	-	-	PUNCT
fuelectenerg-900	610	15	atmospheric	atmospheric	ADJ
fuelectenerg-900	610	16	pressures	pressure	NOUN
fuelectenerg-900	610	17	,	,	PUNCT
fuelectenerg-900	610	18	but	but	CCONJ
fuelectenerg-900	610	19	becomes	become	VERB
fuelectenerg-900	610	20	significant	significant	ADJ
fuelectenerg-900	610	21	as	as	SCONJ
fuelectenerg-900	610	22	the	the	DET
fuelectenerg-900	610	23	pressure	pressure	NOUN
fuelectenerg-900	610	24	decreases	decrease	VERB
fuelectenerg-900	610	25	.	.	PUNCT
fuelectenerg-900	611	1	this	this	DET
fuelectenerg-900	611	2	observation	observation	NOUN
fuelectenerg-900	611	3	is	be	AUX
fuelectenerg-900	611	4	very	very	ADV
fuelectenerg-900	611	5	significant	significant	ADJ
fuelectenerg-900	611	6	when	when	SCONJ
fuelectenerg-900	611	7	optimization	optimization	NOUN
fuelectenerg-900	611	8	of	of	ADP
fuelectenerg-900	611	9	operating	operating	NOUN
fuelectenerg-900	611	10	conditions	condition	NOUN
fuelectenerg-900	611	11	of	of	ADP
fuelectenerg-900	611	12	mems	mem	NOUN
fuelectenerg-900	611	13	/	/	SYM
fuelectenerg-900	611	14	nems	nem	NOUN
fuelectenerg-900	611	15	resonators	resonator	NOUN
fuelectenerg-900	611	16	is	be	AUX
fuelectenerg-900	611	17	performed	perform	VERB
fuelectenerg-900	611	18	.	.	PUNCT
fuelectenerg-900	612	1	in	in	ADP
fuelectenerg-900	612	2	a	a	DET
fuelectenerg-900	612	3	majority	majority	NOUN
fuelectenerg-900	612	4	of	of	ADP
fuelectenerg-900	612	5	studies	study	NOUN
fuelectenerg-900	612	6	resonator	resonator	VERB
fuelectenerg-900	612	7	tm	tm	PRON
fuelectenerg-900	612	8	noise	noise	NOUN
fuelectenerg-900	612	9	is	be	AUX
fuelectenerg-900	612	10	analyzed	analyze	VERB
fuelectenerg-900	612	11	and	and	CCONJ
fuelectenerg-900	612	12	the	the	DET
fuelectenerg-900	612	13	operating	operating	NOUN
fuelectenerg-900	612	14	conditions	condition	NOUN
fuelectenerg-900	612	15	are	be	AUX
fuelectenerg-900	612	16	chosen	choose	VERB
fuelectenerg-900	612	17	so	so	SCONJ
fuelectenerg-900	612	18	to	to	PART
fuelectenerg-900	612	19	minimize	minimize	VERB
fuelectenerg-900	612	20	it	it	PRON
fuelectenerg-900	612	21	.	.	PUNCT
fuelectenerg-900	613	1	this	this	PRON
fuelectenerg-900	613	2	means	mean	VERB
fuelectenerg-900	613	3	that	that	SCONJ
fuelectenerg-900	613	4	low	low	ADJ
fuelectenerg-900	613	5	pressure	pressure	NOUN
fuelectenerg-900	613	6	values	value	NOUN
fuelectenerg-900	613	7	are	be	AUX
fuelectenerg-900	613	8	chosen	choose	VERB
fuelectenerg-900	613	9	at	at	ADP
fuelectenerg-900	613	10	which	which	PRON
fuelectenerg-900	613	11	energy	energy	NOUN
fuelectenerg-900	613	12	dissipation	dissipation	NOUN
fuelectenerg-900	613	13	due	due	ADP
fuelectenerg-900	613	14	to	to	ADP
fuelectenerg-900	613	15	the	the	DET
fuelectenerg-900	613	16	surrounding	surround	VERB
fuelectenerg-900	613	17	medium	medium	NOUN
fuelectenerg-900	613	18	is	be	AUX
fuelectenerg-900	613	19	low	low	ADJ
fuelectenerg-900	613	20	enough	enough	ADV
fuelectenerg-900	613	21	,	,	PUNCT
fuelectenerg-900	613	22	so	so	SCONJ
fuelectenerg-900	613	23	tm	tm	PROPN
fuelectenerg-900	613	24	is	be	AUX
fuelectenerg-900	613	25	also	also	ADV
fuelectenerg-900	613	26	reduced	reduce	VERB
fuelectenerg-900	613	27	.	.	PUNCT
fuelectenerg-900	614	1	at	at	ADP
fuelectenerg-900	614	2	typical	typical	ADJ
fuelectenerg-900	614	3	pressure	pressure	NOUN
fuelectenerg-900	614	4	values	value	NOUN
fuelectenerg-900	614	5	in	in	ADP
fuelectenerg-900	614	6	evacuated	evacuate	VERB
fuelectenerg-900	614	7	mems	mem	NOUN
fuelectenerg-900	614	8	/	/	SYM
fuelectenerg-900	614	9	nems	nem	NOUN
fuelectenerg-900	614	10	resonator	resonator	NOUN
fuelectenerg-900	614	11	packages	package	NOUN
fuelectenerg-900	614	12	,	,	PUNCT
fuelectenerg-900	614	13	ad	ad	NOUN
fuelectenerg-900	614	14	noise	noise	NOUN
fuelectenerg-900	614	15	has	have	VERB
fuelectenerg-900	614	16	its	its	PRON
fuelectenerg-900	614	17	maximum	maximum	ADJ
fuelectenerg-900	614	18	,	,	PUNCT
fuelectenerg-900	614	19	and	and	CCONJ
fuelectenerg-900	614	20	,	,	PUNCT
fuelectenerg-900	614	21	therefore	therefore	ADV
fuelectenerg-900	614	22	,	,	PUNCT
fuelectenerg-900	614	23	it	it	PRON
fuelectenerg-900	614	24	can	can	AUX
fuelectenerg-900	614	25	become	become	VERB
fuelectenerg-900	614	26	dominant	dominant	ADJ
fuelectenerg-900	614	27	[	[	X
fuelectenerg-900	614	28	115	115	NUM
fuelectenerg-900	614	29	,	,	PUNCT
fuelectenerg-900	614	30	123	123	NUM
fuelectenerg-900	614	31	]	]	PUNCT
fuelectenerg-900	614	32	.	.	PUNCT
fuelectenerg-900	615	1	therefore	therefore	ADV
fuelectenerg-900	615	2	,	,	PUNCT
fuelectenerg-900	615	3	the	the	DET
fuelectenerg-900	615	4	optimization	optimization	NOUN
fuelectenerg-900	615	5	of	of	ADP
fuelectenerg-900	615	6	operating	operating	NOUN
fuelectenerg-900	615	7	conditions	condition	NOUN
fuelectenerg-900	615	8	of	of	ADP
fuelectenerg-900	615	9	rf	rf	NOUN
fuelectenerg-900	615	10	mems	mem	NOUN
fuelectenerg-900	615	11	/	/	SYM
fuelectenerg-900	615	12	nems	nem	NOUN
fuelectenerg-900	615	13	resonators	resonator	NOUN
fuelectenerg-900	615	14	in	in	ADP
fuelectenerg-900	615	15	order	order	NOUN
fuelectenerg-900	615	16	to	to	PART
fuelectenerg-900	615	17	minimize	minimize	VERB
fuelectenerg-900	615	18	their	their	PRON
fuelectenerg-900	615	19	total	total	ADJ
fuelectenerg-900	615	20	noise	noise	NOUN
fuelectenerg-900	615	21	must	must	AUX
fuelectenerg-900	615	22	be	be	AUX
fuelectenerg-900	615	23	performed	perform	VERB
fuelectenerg-900	615	24	based	base	VERB
fuelectenerg-900	615	25	on	on	ADP
fuelectenerg-900	615	26	the	the	DET
fuelectenerg-900	615	27	analysis	analysis	NOUN
fuelectenerg-900	615	28	of	of	ADP
fuelectenerg-900	615	29	all	all	DET
fuelectenerg-900	615	30	the	the	DET
fuelectenerg-900	615	31	noises	noise	NOUN
fuelectenerg-900	615	32	dependent	dependent	ADJ
fuelectenerg-900	615	33	on	on	ADP
fuelectenerg-900	615	34	the	the	DET
fuelectenerg-900	615	35	ambient	ambient	ADJ
fuelectenerg-900	615	36	pressure	pressure	NOUN
fuelectenerg-900	615	37	and	and	CCONJ
fuelectenerg-900	615	38	temperature	temperature	NOUN
fuelectenerg-900	615	39	.	.	PUNCT
fuelectenerg-900	616	1	ad	ad	NOUN
fuelectenerg-900	616	2	noise	noise	NOUN
fuelectenerg-900	616	3	becomes	become	VERB
fuelectenerg-900	616	4	increasingly	increasingly	ADV
fuelectenerg-900	616	5	important	important	ADJ
fuelectenerg-900	616	6	in	in	ADP
fuelectenerg-900	616	7	such	such	ADJ
fuelectenerg-900	616	8	analysis	analysis	NOUN
fuelectenerg-900	616	9	with	with	ADP
fuelectenerg-900	616	10	the	the	DET
fuelectenerg-900	616	11	increase	increase	NOUN
fuelectenerg-900	616	12	of	of	ADP
fuelectenerg-900	616	13	resonance	resonance	NOUN
fuelectenerg-900	616	14	frequencies	frequency	NOUN
fuelectenerg-900	616	15	,	,	PUNCT
fuelectenerg-900	616	16	i.e.	i.e.	X
fuelectenerg-900	616	17	with	with	ADP
fuelectenerg-900	616	18	the	the	DET
fuelectenerg-900	616	19	decrease	decrease	NOUN
fuelectenerg-900	616	20	of	of	ADP
fuelectenerg-900	616	21	resonator	resonator	NOUN
fuelectenerg-900	616	22	dimensions	dimension	NOUN
fuelectenerg-900	616	23	,	,	PUNCT
fuelectenerg-900	616	24	as	as	SCONJ
fuelectenerg-900	616	25	can	can	AUX
fuelectenerg-900	616	26	be	be	AUX
fuelectenerg-900	616	27	seen	see	VERB
fuelectenerg-900	616	28	in	in	ADP
fuelectenerg-900	616	29	fig	fig	NOUN
fuelectenerg-900	616	30	.	.	PUNCT
fuelectenerg-900	617	1	7b	7b	NOUN
fuelectenerg-900	617	2	.	.	PUNCT
fuelectenerg-900	618	1	ad	ad	NOUN
fuelectenerg-900	618	2	phase	phase	NOUN
fuelectenerg-900	618	3	noise	noise	NOUN
fuelectenerg-900	618	4	of	of	ADP
fuelectenerg-900	618	5	the	the	DET
fuelectenerg-900	618	6	same	same	ADJ
fuelectenerg-900	618	7	resonator	resonator	NOUN
fuelectenerg-900	618	8	,	,	PUNCT
fuelectenerg-900	618	9	but	but	CCONJ
fuelectenerg-900	618	10	operating	operate	VERB
fuelectenerg-900	618	11	in	in	ADP
fuelectenerg-900	618	12	a	a	DET
fuelectenerg-900	618	13	two	two	NUM
fuelectenerg-900	618	14	-	-	PUNCT
fuelectenerg-900	618	15	gas	gas	NOUN
fuelectenerg-900	618	16	atmosphere	atmosphere	NOUN
fuelectenerg-900	618	17	,	,	PUNCT
fuelectenerg-900	618	18	is	be	AUX
fuelectenerg-900	618	19	shown	show	VERB
fuelectenerg-900	618	20	in	in	ADP
fuelectenerg-900	618	21	fig	fig	NOUN
fuelectenerg-900	618	22	.	.	PUNCT
fuelectenerg-900	619	1	7c	7c	NUM
fuelectenerg-900	619	2	,	,	PUNCT
fuelectenerg-900	619	3	as	as	ADP
fuelectenerg-900	619	4	a	a	DET
fuelectenerg-900	619	5	function	function	NOUN
fuelectenerg-900	619	6	of	of	ADP
fuelectenerg-900	619	7	both	both	CCONJ
fuelectenerg-900	619	8	the	the	DET
fuelectenerg-900	619	9	gas	gas	NOUN
fuelectenerg-900	619	10	1	1	NUM
fuelectenerg-900	619	11	pressure	pressure	NOUN
fuelectenerg-900	619	12	(	(	PUNCT
fuelectenerg-900	619	13	the	the	DET
fuelectenerg-900	619	14	gas	gas	NOUN
fuelectenerg-900	619	15	2	2	NUM
fuelectenerg-900	619	16	pressure	pressure	NOUN
fuelectenerg-900	619	17	is	be	AUX
fuelectenerg-900	619	18	p2=10	p2=10	NOUN
fuelectenerg-900	619	19	3	3	NUM
fuelectenerg-900	619	20	pa	pa	PROPN
fuelectenerg-900	619	21	,	,	PUNCT
fuelectenerg-900	619	22	t=300	t=300	NUM
fuelectenerg-900	619	23	k	k	NOUN
fuelectenerg-900	619	24	)	)	PUNCT
fuelectenerg-900	619	25	and	and	CCONJ
fuelectenerg-900	619	26	the	the	DET
fuelectenerg-900	619	27	offset	offset	NOUN
fuelectenerg-900	619	28	frequency	frequency	NOUN
fuelectenerg-900	619	29	.	.	PUNCT
fuelectenerg-900	620	1	it	it	PRON
fuelectenerg-900	620	2	can	can	AUX
fuelectenerg-900	620	3	be	be	AUX
fuelectenerg-900	620	4	observed	observe	VERB
fuelectenerg-900	620	5	that	that	SCONJ
fuelectenerg-900	620	6	the	the	DET
fuelectenerg-900	620	7	presence	presence	NOUN
fuelectenerg-900	620	8	of	of	ADP
fuelectenerg-900	620	9	multiple	multiple	ADJ
fuelectenerg-900	620	10	gases	gas	NOUN
fuelectenerg-900	620	11	affects	affect	VERB
fuelectenerg-900	620	12	resonator	resonator	NOUN
fuelectenerg-900	620	13	ad	ad	NOUN
fuelectenerg-900	620	14	noise	noise	NOUN
fuelectenerg-900	620	15	.	.	PUNCT
fuelectenerg-900	621	1	in	in	ADP
fuelectenerg-900	621	2	[	[	X
fuelectenerg-900	621	3	116	116	NUM
fuelectenerg-900	621	4	,	,	PUNCT
fuelectenerg-900	621	5	117	117	NUM
fuelectenerg-900	621	6	]	]	PUNCT
fuelectenerg-900	621	7	it	it	PRON
fuelectenerg-900	621	8	is	be	AUX
fuelectenerg-900	621	9	shown	show	VERB
fuelectenerg-900	621	10	that	that	SCONJ
fuelectenerg-900	621	11	in	in	ADP
fuelectenerg-900	621	12	a	a	DET
fuelectenerg-900	621	13	certain	certain	ADJ
fuelectenerg-900	621	14	pressure	pressure	NOUN
fuelectenerg-900	621	15	and	and	CCONJ
fuelectenerg-900	621	16	frequency	frequency	NOUN
fuelectenerg-900	621	17	range	range	NOUN
fuelectenerg-900	621	18	the	the	DET
fuelectenerg-900	621	19	magnitude	magnitude	NOUN
fuelectenerg-900	621	20	of	of	ADP
fuelectenerg-900	621	21	the	the	DET
fuelectenerg-900	621	22	ad	ad	NOUN
fuelectenerg-900	621	23	noise	noise	NOUN
fuelectenerg-900	621	24	spectrum	spectrum	NOUN
fuelectenerg-900	621	25	for	for	ADP
fuelectenerg-900	621	26	two	two	NUM
fuelectenerg-900	621	27	-	-	PUNCT
fuelectenerg-900	621	28	gas	gas	NOUN
fuelectenerg-900	621	29	adsorption	adsorption	NOUN
fuelectenerg-900	621	30	is	be	AUX
fuelectenerg-900	621	31	lower	low	ADJ
fuelectenerg-900	621	32	than	than	ADP
fuelectenerg-900	621	33	for	for	ADP
fuelectenerg-900	621	34	the	the	DET
fuelectenerg-900	621	35	case	case	NOUN
fuelectenerg-900	621	36	of	of	ADP
fuelectenerg-900	621	37	one	one	NUM
fuelectenerg-900	621	38	gas	gas	NOUN
fuelectenerg-900	621	39	.	.	PUNCT
fuelectenerg-900	622	1	however	however	ADV
fuelectenerg-900	622	2	,	,	PUNCT
fuelectenerg-900	622	3	since	since	SCONJ
fuelectenerg-900	622	4	the	the	DET
fuelectenerg-900	622	5	decrease	decrease	NOUN
fuelectenerg-900	622	6	does	do	AUX
fuelectenerg-900	622	7	not	not	PART
fuelectenerg-900	622	8	exist	exist	VERB
fuelectenerg-900	622	9	at	at	ADP
fuelectenerg-900	622	10	all	all	DET
fuelectenerg-900	622	11	frequencies	frequency	NOUN
fuelectenerg-900	622	12	,	,	PUNCT
fuelectenerg-900	622	13	the	the	DET
fuelectenerg-900	622	14	effect	effect	NOUN
fuelectenerg-900	622	15	of	of	ADP
fuelectenerg-900	622	16	the	the	DET
fuelectenerg-900	622	17	gas	gas	NOUN
fuelectenerg-900	622	18	mixture	mixture	NOUN
fuelectenerg-900	622	19	composition	composition	NOUN
fuelectenerg-900	622	20	on	on	ADP
fuelectenerg-900	622	21	the	the	DET
fuelectenerg-900	622	22	total	total	ADJ
fuelectenerg-900	622	23	ad	ad	NOUN
fuelectenerg-900	622	24	noise	noise	NOUN
fuelectenerg-900	622	25	in	in	ADP
fuelectenerg-900	622	26	the	the	DET
fuelectenerg-900	622	27	bandwidth	bandwidth	NOUN
fuelectenerg-900	622	28	of	of	ADP
fuelectenerg-900	622	29	interest	interest	NOUN
fuelectenerg-900	622	30	should	should	AUX
fuelectenerg-900	622	31	be	be	AUX
fuelectenerg-900	622	32	observed	observe	VERB
fuelectenerg-900	622	33	.	.	PUNCT
fuelectenerg-900	623	1	the	the	DET
fuelectenerg-900	623	2	presented	present	VERB
fuelectenerg-900	623	3	theory	theory	NOUN
fuelectenerg-900	623	4	enables	enable	VERB
fuelectenerg-900	623	5	performing	perform	VERB
fuelectenerg-900	623	6	the	the	DET
fuelectenerg-900	623	7	analysis	analysis	NOUN
fuelectenerg-900	623	8	that	that	PRON
fuelectenerg-900	623	9	yields	yield	VERB
fuelectenerg-900	623	10	the	the	DET
fuelectenerg-900	623	11	optimal	optimal	ADJ
fuelectenerg-900	623	12	gas	gas	NOUN
fuelectenerg-900	623	13	mixture	mixture	NOUN
fuelectenerg-900	623	14	composition	composition	NOUN
fuelectenerg-900	623	15	at	at	ADP
fuelectenerg-900	623	16	which	which	PRON
fuelectenerg-900	623	17	the	the	DET
fuelectenerg-900	623	18	resonator	resonator	NOUN
fuelectenerg-900	623	19	ad	ad	NOUN
fuelectenerg-900	623	20	noise	noise	NOUN
fuelectenerg-900	623	21	is	be	AUX
fuelectenerg-900	623	22	minimized	minimize	VERB
fuelectenerg-900	623	23	.	.	PUNCT
fuelectenerg-900	624	1	the	the	DET
fuelectenerg-900	624	2	psd	psd	PROPN
fuelectenerg-900	624	3	s,ad(	s,ad(	NOUN
fuelectenerg-900	624	4	)	)	PUNCT
fuelectenerg-900	624	5	for	for	ADP
fuelectenerg-900	624	6	a	a	DET
fuelectenerg-900	624	7	single	single	ADJ
fuelectenerg-900	624	8	gas	gas	NOUN
fuelectenerg-900	624	9	atmosphere	atmosphere	NOUN
fuelectenerg-900	624	10	at	at	ADP
fuelectenerg-900	624	11	different	different	ADJ
fuelectenerg-900	624	12	gas	gas	NOUN
fuelectenerg-900	624	13	pressures	pressure	NOUN
fuelectenerg-900	624	14	[	[	X
fuelectenerg-900	624	15	122	122	NUM
fuelectenerg-900	624	16	]	]	PUNCT
fuelectenerg-900	624	17	is	be	AUX
fuelectenerg-900	624	18	shown	show	VERB
fuelectenerg-900	624	19	in	in	ADP
fuelectenerg-900	624	20	fig	fig	NOUN
fuelectenerg-900	624	21	.	.	PUNCT
fuelectenerg-900	625	1	7d	7d	NUM
fuelectenerg-900	625	2	,	,	PUNCT
fuelectenerg-900	625	3	for	for	ADP
fuelectenerg-900	625	4	the	the	DET
fuelectenerg-900	625	5	same	same	ADJ
fuelectenerg-900	625	6	example	example	NOUN
fuelectenerg-900	625	7	as	as	SCONJ
fuelectenerg-900	625	8	shown	show	VERB
fuelectenerg-900	625	9	in	in	ADP
fuelectenerg-900	625	10	fig	fig	NOUN
fuelectenerg-900	625	11	.	.	PUNCT
fuelectenerg-900	626	1	7a	7a	NUM
fuelectenerg-900	626	2	.	.	PUNCT
fuelectenerg-900	627	1	the	the	DET
fuelectenerg-900	627	2	pressure	pressure	NOUN
fuelectenerg-900	627	3	values	value	NOUN
fuelectenerg-900	627	4	are	be	AUX
fuelectenerg-900	627	5	chosen	choose	VERB
fuelectenerg-900	627	6	:	:	PUNCT
fuelectenerg-900	627	7	one	one	NUM
fuelectenerg-900	627	8	of	of	ADP
fuelectenerg-900	627	9	them	they	PRON
fuelectenerg-900	627	10	approximates	approximate	VERB
fuelectenerg-900	627	11	the	the	DET
fuelectenerg-900	627	12	pressure	pressure	NOUN
fuelectenerg-900	627	13	at	at	ADP
fuelectenerg-900	627	14	which	which	PRON
fuelectenerg-900	627	15	ad	ad	NOUN
fuelectenerg-900	627	16	noise	noise	NOUN
fuelectenerg-900	627	17	has	have	VERB
fuelectenerg-900	627	18	its	its	PRON
fuelectenerg-900	627	19	maximum	maximum	ADJ
fuelectenerg-900	627	20	,	,	PUNCT
fuelectenerg-900	627	21	another	another	DET
fuelectenerg-900	627	22	one	one	NOUN
fuelectenerg-900	627	23	is	be	AUX
fuelectenerg-900	627	24	an	an	DET
fuelectenerg-900	627	25	order	order	NOUN
fuelectenerg-900	627	26	of	of	ADP
fuelectenerg-900	627	27	magnitude	magnitude	NOUN
fuelectenerg-900	627	28	lower	low	ADJ
fuelectenerg-900	627	29	,	,	PUNCT
fuelectenerg-900	627	30	and	and	CCONJ
fuelectenerg-900	627	31	the	the	DET
fuelectenerg-900	627	32	remaining	remain	VERB
fuelectenerg-900	627	33	one	one	NUM
fuelectenerg-900	627	34	an	an	DET
fuelectenerg-900	627	35	order	order	NOUN
fuelectenerg-900	627	36	of	of	ADP
fuelectenerg-900	627	37	magnitude	magnitude	NOUN
fuelectenerg-900	627	38	higher	high	ADJ
fuelectenerg-900	627	39	.	.	PUNCT
fuelectenerg-900	628	1	this	this	PRON
fuelectenerg-900	628	2	is	be	AUX
fuelectenerg-900	628	3	the	the	DET
fuelectenerg-900	628	4	first	first	ADJ
fuelectenerg-900	628	5	result	result	NOUN
fuelectenerg-900	628	6	that	that	PRON
fuelectenerg-900	628	7	illustrates	illustrate	VERB
fuelectenerg-900	628	8	the	the	DET
fuelectenerg-900	628	9	spectral	spectral	ADJ
fuelectenerg-900	628	10	dependence	dependence	NOUN
fuelectenerg-900	628	11	of	of	ADP
fuelectenerg-900	628	12	the	the	DET
fuelectenerg-900	628	13	component	component	NOUN
fuelectenerg-900	628	14	of	of	ADP
fuelectenerg-900	628	15	the	the	DET
fuelectenerg-900	628	16	oscillator	oscillator	NOUN
fuelectenerg-900	628	17	phase	phase	NOUN
fuelectenerg-900	628	18	374	374	NUM
fuelectenerg-900	628	19	i.	i.	NOUN
fuelectenerg-900	628	20	jokić	jokić	PROPN
fuelectenerg-900	628	21	,	,	PUNCT
fuelectenerg-900	628	22	m.	m.	NOUN
fuelectenerg-900	628	23	frantlović	frantlović	NOUN
fuelectenerg-900	628	24	,	,	PUNCT
fuelectenerg-900	628	25	z.	z.	PROPN
fuelectenerg-900	628	26	djurić	djurić	PROPN
fuelectenerg-900	628	27	,	,	PUNCT
fuelectenerg-900	628	28	m.	m.	NOUN
fuelectenerg-900	628	29	l.	l.	PROPN
fuelectenerg-900	628	30	dukić	dukić	PROPN
fuelectenerg-900	628	31	noise	noise	NOUN
fuelectenerg-900	628	32	that	that	PRON
fuelectenerg-900	628	33	is	be	AUX
fuelectenerg-900	628	34	caused	cause	VERB
fuelectenerg-900	628	35	by	by	ADP
fuelectenerg-900	628	36	the	the	DET
fuelectenerg-900	628	37	ad	ad	NOUN
fuelectenerg-900	628	38	frequency	frequency	NOUN
fuelectenerg-900	628	39	noise	noise	NOUN
fuelectenerg-900	628	40	.	.	PUNCT
fuelectenerg-900	629	1	its	its	PRON
fuelectenerg-900	629	2	influence	influence	NOUN
fuelectenerg-900	629	3	on	on	ADP
fuelectenerg-900	629	4	oscillator	oscillator	NOUN
fuelectenerg-900	629	5	noise	noise	NOUN
fuelectenerg-900	629	6	must	must	AUX
fuelectenerg-900	629	7	be	be	AUX
fuelectenerg-900	629	8	analyzed	analyze	VERB
fuelectenerg-900	629	9	together	together	ADV
fuelectenerg-900	629	10	with	with	ADP
fuelectenerg-900	629	11	the	the	DET
fuelectenerg-900	629	12	other	other	ADJ
fuelectenerg-900	629	13	two	two	NUM
fuelectenerg-900	629	14	components	component	NOUN
fuelectenerg-900	629	15	(	(	PUNCT
fuelectenerg-900	629	16	s,b(	s,b(	PROPN
fuelectenerg-900	629	17	)	)	PUNCT
fuelectenerg-900	629	18	and	and	CCONJ
fuelectenerg-900	629	19	s,1	s,1	NOUN
fuelectenerg-900	629	20	/	/	SYM
fuelectenerg-900	629	21	f(	f(	PROPN
fuelectenerg-900	629	22	)	)	PUNCT
fuelectenerg-900	629	23	)	)	PUNCT
fuelectenerg-900	629	24	,	,	PUNCT
fuelectenerg-900	629	25	by	by	ADP
fuelectenerg-900	629	26	determining	determine	VERB
fuelectenerg-900	629	27	the	the	DET
fuelectenerg-900	629	28	total	total	ADJ
fuelectenerg-900	629	29	psd	psd	NOUN
fuelectenerg-900	629	30	of	of	ADP
fuelectenerg-900	629	31	(t	(t	NOUN
fuelectenerg-900	629	32	)	)	PUNCT
fuelectenerg-900	629	33	,	,	PUNCT
fuelectenerg-900	629	34	i.e.	i.e.	X
fuelectenerg-900	629	35	s(	s(	X
fuelectenerg-900	629	36	)	)	PUNCT
fuelectenerg-900	629	37	(	(	PUNCT
fuelectenerg-900	629	38	as	as	ADP
fuelectenerg-900	629	39	the	the	DET
fuelectenerg-900	629	40	convolution	convolution	NOUN
fuelectenerg-900	629	41	in	in	ADP
fuelectenerg-900	629	42	the	the	DET
fuelectenerg-900	629	43	frequency	frequency	NOUN
fuelectenerg-900	629	44	domain	domain	NOUN
fuelectenerg-900	629	45	of	of	ADP
fuelectenerg-900	629	46	the	the	DET
fuelectenerg-900	629	47	three	three	NUM
fuelectenerg-900	629	48	psds	psds	NOUN
fuelectenerg-900	629	49	)	)	PUNCT
fuelectenerg-900	629	50	,	,	PUNCT
fuelectenerg-900	629	51	and	and	CCONJ
fuelectenerg-900	629	52	subsequently	subsequently	ADV
fuelectenerg-900	629	53	(	(	PUNCT
fuelectenerg-900	629	54	based	base	VERB
fuelectenerg-900	629	55	on	on	ADP
fuelectenerg-900	629	56	eq	eq	ADP
fuelectenerg-900	629	57	.	.	PUNCT
fuelectenerg-900	630	1	(	(	PUNCT
fuelectenerg-900	630	2	15	15	NUM
fuelectenerg-900	630	3	)	)	PUNCT
fuelectenerg-900	630	4	)	)	PUNCT
fuelectenerg-900	631	1	obtaining	obtain	VERB
fuelectenerg-900	631	2	the	the	DET
fuelectenerg-900	631	3	oscillator	oscillator	NOUN
fuelectenerg-900	631	4	phase	phase	NOUN
fuelectenerg-900	631	5	noise	noise	NOUN
fuelectenerg-900	631	6	,	,	PUNCT
fuelectenerg-900	631	7	which	which	PRON
fuelectenerg-900	631	8	includes	include	VERB
fuelectenerg-900	631	9	the	the	DET
fuelectenerg-900	631	10	influence	influence	NOUN
fuelectenerg-900	631	11	of	of	ADP
fuelectenerg-900	631	12	the	the	DET
fuelectenerg-900	631	13	resonator	resonator	NOUN
fuelectenerg-900	631	14	ad	ad	NOUN
fuelectenerg-900	631	15	noise	noise	NOUN
fuelectenerg-900	631	16	.	.	PUNCT
fuelectenerg-900	632	1	fig	fig	NOUN
fuelectenerg-900	632	2	.	.	PUNCT
fuelectenerg-900	633	1	7	7	NUM
fuelectenerg-900	633	2	a	a	PRON
fuelectenerg-900	633	3	)	)	PUNCT
fuelectenerg-900	633	4	dependence	dependence	NOUN
fuelectenerg-900	633	5	of	of	ADP
fuelectenerg-900	633	6	the	the	DET
fuelectenerg-900	633	7	mems	mem	NOUN
fuelectenerg-900	633	8	/	/	SYM
fuelectenerg-900	633	9	nems	nem	NOUN
fuelectenerg-900	633	10	resonator	resonator	NOUN
fuelectenerg-900	633	11	ad	ad	NOUN
fuelectenerg-900	633	12	phase	phase	NOUN
fuelectenerg-900	633	13	noise	noise	NOUN
fuelectenerg-900	633	14	(	(	PUNCT
fuelectenerg-900	633	15	single	single	ADJ
fuelectenerg-900	633	16	gas	gas	NOUN
fuelectenerg-900	633	17	single	single	ADJ
fuelectenerg-900	633	18	layer	layer	NOUN
fuelectenerg-900	633	19	adsorption	adsorption	NOUN
fuelectenerg-900	633	20	)	)	PUNCT
fuelectenerg-900	633	21	on	on	ADP
fuelectenerg-900	633	22	gas	gas	NOUN
fuelectenerg-900	633	23	pressure	pressure	NOUN
fuelectenerg-900	633	24	and	and	CCONJ
fuelectenerg-900	633	25	offset	offset	VERB
fuelectenerg-900	633	26	frequency	frequency	NOUN
fuelectenerg-900	633	27	(	(	PUNCT
fuelectenerg-900	633	28	t=300	t=300	NUM
fuelectenerg-900	633	29	k	k	NOUN
fuelectenerg-900	633	30	,	,	PUNCT
fuelectenerg-900	633	31	nitrogen	nitrogen	NOUN
fuelectenerg-900	633	32	,	,	PUNCT
fuelectenerg-900	633	33	f0=50	f0=50	ADJ
fuelectenerg-900	633	34	mhz	mhz	NOUN
fuelectenerg-900	633	35	)	)	PUNCT
fuelectenerg-900	633	36	,	,	PUNCT
fuelectenerg-900	633	37	b	b	X
fuelectenerg-900	633	38	)	)	PUNCT
fuelectenerg-900	633	39	ad	ad	NOUN
fuelectenerg-900	633	40	phase	phase	NOUN
fuelectenerg-900	633	41	noise	noise	NOUN
fuelectenerg-900	633	42	(	(	PUNCT
fuelectenerg-900	633	43	single	single	ADJ
fuelectenerg-900	633	44	gas	gas	NOUN
fuelectenerg-900	633	45	single	single	ADJ
fuelectenerg-900	633	46	layer	layer	NOUN
fuelectenerg-900	633	47	adsorption	adsorption	NOUN
fuelectenerg-900	633	48	)	)	PUNCT
fuelectenerg-900	633	49	as	as	ADP
fuelectenerg-900	633	50	a	a	DET
fuelectenerg-900	633	51	function	function	NOUN
fuelectenerg-900	633	52	of	of	ADP
fuelectenerg-900	633	53	the	the	DET
fuelectenerg-900	633	54	resonance	resonance	NOUN
fuelectenerg-900	633	55	frequency	frequency	NOUN
fuelectenerg-900	633	56	(	(	PUNCT
fuelectenerg-900	633	57	p=0.01	p=0.01	PROPN
fuelectenerg-900	633	58	pa	pa	PROPN
fuelectenerg-900	633	59	)	)	PUNCT
fuelectenerg-900	633	60	,	,	PUNCT
fuelectenerg-900	633	61	c	c	X
fuelectenerg-900	633	62	)	)	PUNCT
fuelectenerg-900	633	63	ad	ad	NOUN
fuelectenerg-900	633	64	phase	phase	NOUN
fuelectenerg-900	633	65	noise	noise	NOUN
fuelectenerg-900	633	66	for	for	ADP
fuelectenerg-900	633	67	a	a	DET
fuelectenerg-900	633	68	two	two	NUM
fuelectenerg-900	633	69	-	-	PUNCT
fuelectenerg-900	633	70	gas	gas	NOUN
fuelectenerg-900	633	71	atmosphere	atmosphere	NOUN
fuelectenerg-900	633	72	,	,	PUNCT
fuelectenerg-900	633	73	as	as	ADP
fuelectenerg-900	633	74	a	a	DET
fuelectenerg-900	633	75	function	function	NOUN
fuelectenerg-900	633	76	of	of	ADP
fuelectenerg-900	633	77	the	the	DET
fuelectenerg-900	633	78	gas	gas	NOUN
fuelectenerg-900	633	79	1	1	NUM
fuelectenerg-900	633	80	pressure	pressure	NOUN
fuelectenerg-900	633	81	and	and	CCONJ
fuelectenerg-900	633	82	offset	offset	VERB
fuelectenerg-900	633	83	frequency	frequency	NOUN
fuelectenerg-900	633	84	(	(	PUNCT
fuelectenerg-900	633	85	pressure	pressure	NOUN
fuelectenerg-900	633	86	of	of	ADP
fuelectenerg-900	633	87	the	the	DET
fuelectenerg-900	633	88	gas	gas	NOUN
fuelectenerg-900	633	89	2	2	NUM
fuelectenerg-900	633	90	is	be	AUX
fuelectenerg-900	633	91	p2=10	p2=10	NOUN
fuelectenerg-900	633	92	3	3	NUM
fuelectenerg-900	633	93	pa	pa	PROPN
fuelectenerg-900	633	94	)	)	PUNCT
fuelectenerg-900	633	95	,	,	PUNCT
fuelectenerg-900	633	96	d	d	X
fuelectenerg-900	633	97	)	)	PUNCT
fuelectenerg-900	633	98	the	the	DET
fuelectenerg-900	633	99	calculated	calculated	ADJ
fuelectenerg-900	633	100	psd	psd	PROPN
fuelectenerg-900	633	101	(	(	PUNCT
fuelectenerg-900	633	102	eq	eq	NOUN
fuelectenerg-900	633	103	.	.	PUNCT
fuelectenerg-900	633	104	(	(	PUNCT
fuelectenerg-900	633	105	19	19	NUM
fuelectenerg-900	633	106	)	)	PUNCT
fuelectenerg-900	633	107	)	)	PUNCT
fuelectenerg-900	633	108	of	of	ADP
fuelectenerg-900	633	109	the	the	DET
fuelectenerg-900	633	110	oscillator	oscillator	NOUN
fuelectenerg-900	633	111	phase	phase	NOUN
fuelectenerg-900	633	112	noise	noise	NOUN
fuelectenerg-900	633	113	constituent	constituent	NOUN
fuelectenerg-900	633	114	caused	cause	VERB
fuelectenerg-900	633	115	by	by	ADP
fuelectenerg-900	633	116	ad	ad	NOUN
fuelectenerg-900	633	117	process	process	NOUN
fuelectenerg-900	633	118	of	of	ADP
fuelectenerg-900	633	119	a	a	DET
fuelectenerg-900	633	120	single	single	ADJ
fuelectenerg-900	633	121	gas	gas	NOUN
fuelectenerg-900	633	122	of	of	ADP
fuelectenerg-900	633	123	pressure	pressure	NOUN
fuelectenerg-900	633	124	p.	p.	NOUN
fuelectenerg-900	633	125	4	4	NUM
fuelectenerg-900	633	126	.	.	PUNCT
fuelectenerg-900	633	127	conclusion	conclusion	NOUN
fuelectenerg-900	633	128	rf	rf	NOUN
fuelectenerg-900	633	129	components	component	NOUN
fuelectenerg-900	633	130	based	base	VERB
fuelectenerg-900	633	131	on	on	ADP
fuelectenerg-900	633	132	mems	mem	NOUN
fuelectenerg-900	633	133	and	and	CCONJ
fuelectenerg-900	633	134	nems	nem	NOUN
fuelectenerg-900	633	135	structures	structure	NOUN
fuelectenerg-900	633	136	are	be	AUX
fuelectenerg-900	633	137	expected	expect	VERB
fuelectenerg-900	633	138	to	to	PART
fuelectenerg-900	633	139	have	have	VERB
fuelectenerg-900	633	140	an	an	DET
fuelectenerg-900	633	141	important	important	ADJ
fuelectenerg-900	633	142	role	role	NOUN
fuelectenerg-900	633	143	in	in	ADP
fuelectenerg-900	633	144	achieving	achieve	VERB
fuelectenerg-900	633	145	new	new	ADJ
fuelectenerg-900	633	146	levels	level	NOUN
fuelectenerg-900	633	147	of	of	ADP
fuelectenerg-900	633	148	integration	integration	NOUN
fuelectenerg-900	633	149	and	and	CCONJ
fuelectenerg-900	633	150	reconfigurability	reconfigurability	NOUN
fuelectenerg-900	633	151	of	of	ADP
fuelectenerg-900	633	152	transceivers	transceiver	NOUN
fuelectenerg-900	633	153	in	in	ADP
fuelectenerg-900	633	154	future	future	ADJ
fuelectenerg-900	633	155	mobile	mobile	ADJ
fuelectenerg-900	633	156	terminals	terminal	NOUN
fuelectenerg-900	633	157	.	.	PUNCT
fuelectenerg-900	634	1	mems	mem	NOUN
fuelectenerg-900	634	2	/	/	SYM
fuelectenerg-900	634	3	nems	nem	NOUN
fuelectenerg-900	634	4	resonators	resonator	NOUN
fuelectenerg-900	634	5	have	have	AUX
fuelectenerg-900	634	6	generated	generate	VERB
fuelectenerg-900	634	7	a	a	DET
fuelectenerg-900	634	8	significant	significant	ADJ
fuelectenerg-900	634	9	interest	interest	NOUN
fuelectenerg-900	634	10	rf	rf	NOUN
fuelectenerg-900	634	11	mems	mem	NOUN
fuelectenerg-900	634	12	/	/	SYM
fuelectenerg-900	634	13	nems	nem	NOUN
fuelectenerg-900	634	14	resonators	resonator	NOUN
fuelectenerg-900	634	15	for	for	ADP
fuelectenerg-900	634	16	wireless	wireless	ADJ
fuelectenerg-900	634	17	communication	communication	NOUN
fuelectenerg-900	634	18	systems	system	NOUN
fuelectenerg-900	634	19	and	and	CCONJ
fuelectenerg-900	634	20	adsorption	adsorption	NOUN
fuelectenerg-900	634	21	-	-	PUNCT
fuelectenerg-900	634	22	desorption	desorption	NOUN
fuelectenerg-900	634	23	phase	phase	NOUN
fuelectenerg-900	634	24	noise	noise	NOUN
fuelectenerg-900	634	25	375	375	NUM
fuelectenerg-900	634	26	because	because	SCONJ
fuelectenerg-900	634	27	of	of	ADP
fuelectenerg-900	634	28	their	their	PRON
fuelectenerg-900	634	29	ultra	ultra	ADJ
fuelectenerg-900	634	30	-	-	ADJ
fuelectenerg-900	634	31	high	high	ADJ
fuelectenerg-900	634	32	resonance	resonance	NOUN
fuelectenerg-900	634	33	frequencies	frequency	NOUN
fuelectenerg-900	634	34	,	,	PUNCT
fuelectenerg-900	634	35	small	small	ADJ
fuelectenerg-900	634	36	size	size	NOUN
fuelectenerg-900	634	37	,	,	PUNCT
fuelectenerg-900	634	38	very	very	ADV
fuelectenerg-900	634	39	low	low	ADJ
fuelectenerg-900	634	40	operating	operating	NOUN
fuelectenerg-900	634	41	power	power	NOUN
fuelectenerg-900	634	42	,	,	PUNCT
fuelectenerg-900	634	43	high	high	ADJ
fuelectenerg-900	634	44	quality	quality	NOUN
fuelectenerg-900	634	45	factors	factor	NOUN
fuelectenerg-900	634	46	and	and	CCONJ
fuelectenerg-900	634	47	possibility	possibility	NOUN
fuelectenerg-900	634	48	of	of	ADP
fuelectenerg-900	634	49	integration	integration	NOUN
fuelectenerg-900	634	50	with	with	ADP
fuelectenerg-900	634	51	silicon	silicon	PROPN
fuelectenerg-900	634	52	ic	ic	PROPN
fuelectenerg-900	634	53	technologies	technology	NOUN
fuelectenerg-900	634	54	.	.	PUNCT
fuelectenerg-900	635	1	rf	rf	NOUN
fuelectenerg-900	635	2	mems	mem	NOUN
fuelectenerg-900	635	3	resonators	resonator	NOUN
fuelectenerg-900	635	4	have	have	AUX
fuelectenerg-900	635	5	already	already	ADV
fuelectenerg-900	635	6	become	become	VERB
fuelectenerg-900	635	7	a	a	DET
fuelectenerg-900	635	8	competitive	competitive	ADJ
fuelectenerg-900	635	9	alternative	alternative	NOUN
fuelectenerg-900	635	10	to	to	ADP
fuelectenerg-900	635	11	conventional	conventional	ADJ
fuelectenerg-900	635	12	components	component	NOUN
fuelectenerg-900	635	13	used	use	VERB
fuelectenerg-900	635	14	for	for	ADP
fuelectenerg-900	635	15	realization	realization	NOUN
fuelectenerg-900	635	16	of	of	ADP
fuelectenerg-900	635	17	rf	rf	PRON
fuelectenerg-900	635	18	filtering	filter	VERB
fuelectenerg-900	635	19	and	and	CCONJ
fuelectenerg-900	635	20	frequency	frequency	NOUN
fuelectenerg-900	635	21	synthesis	synthesis	NOUN
fuelectenerg-900	635	22	in	in	ADP
fuelectenerg-900	635	23	wireless	wireless	ADJ
fuelectenerg-900	635	24	transceivers	transceiver	NOUN
fuelectenerg-900	635	25	.	.	PUNCT
fuelectenerg-900	636	1	significant	significant	ADJ
fuelectenerg-900	636	2	results	result	NOUN
fuelectenerg-900	636	3	achieved	achieve	VERB
fuelectenerg-900	636	4	after	after	ADP
fuelectenerg-900	636	5	the	the	DET
fuelectenerg-900	636	6	year	year	NOUN
fuelectenerg-900	636	7	2000	2000	NUM
fuelectenerg-900	636	8	(	(	PUNCT
fuelectenerg-900	636	9	especially	especially	ADV
fuelectenerg-900	636	10	in	in	ADP
fuelectenerg-900	636	11	terms	term	NOUN
fuelectenerg-900	636	12	of	of	ADP
fuelectenerg-900	636	13	better	well	ADJ
fuelectenerg-900	636	14	temperature	temperature	NOUN
fuelectenerg-900	636	15	stability	stability	NOUN
fuelectenerg-900	636	16	,	,	PUNCT
fuelectenerg-900	636	17	better	well	ADJ
fuelectenerg-900	636	18	long	long	ADJ
fuelectenerg-900	636	19	-	-	PUNCT
fuelectenerg-900	636	20	term	term	NOUN
fuelectenerg-900	636	21	stability	stability	NOUN
fuelectenerg-900	636	22	,	,	PUNCT
fuelectenerg-900	636	23	improved	improved	ADJ
fuelectenerg-900	636	24	packaging	packaging	NOUN
fuelectenerg-900	636	25	)	)	PUNCT
fuelectenerg-900	636	26	have	have	AUX
fuelectenerg-900	636	27	enabled	enable	VERB
fuelectenerg-900	636	28	the	the	DET
fuelectenerg-900	636	29	commercialization	commercialization	NOUN
fuelectenerg-900	636	30	of	of	ADP
fuelectenerg-900	636	31	both	both	PRON
fuelectenerg-900	636	32	piezoelectric	piezoelectric	NOUN
fuelectenerg-900	636	33	and	and	CCONJ
fuelectenerg-900	636	34	capacitive	capacitive	ADJ
fuelectenerg-900	636	35	mems	mem	NOUN
fuelectenerg-900	636	36	resonators	resonator	NOUN
fuelectenerg-900	636	37	.	.	PUNCT
fuelectenerg-900	637	1	due	due	ADP
fuelectenerg-900	637	2	to	to	ADP
fuelectenerg-900	637	3	unique	unique	ADJ
fuelectenerg-900	637	4	mechanical	mechanical	ADJ
fuelectenerg-900	637	5	properties	property	NOUN
fuelectenerg-900	637	6	(	(	PUNCT
fuelectenerg-900	637	7	enabling	enable	VERB
fuelectenerg-900	637	8	high	high	ADJ
fuelectenerg-900	637	9	resonance	resonance	NOUN
fuelectenerg-900	637	10	frequencies	frequency	NOUN
fuelectenerg-900	637	11	)	)	PUNCT
fuelectenerg-900	637	12	,	,	PUNCT
fuelectenerg-900	637	13	especially	especially	ADV
fuelectenerg-900	637	14	their	their	PRON
fuelectenerg-900	637	15	mechanical	mechanical	ADJ
fuelectenerg-900	637	16	compliance	compliance	NOUN
fuelectenerg-900	637	17	needed	need	VERB
fuelectenerg-900	637	18	for	for	ADP
fuelectenerg-900	637	19	high	high	ADJ
fuelectenerg-900	637	20	frequency	frequency	NOUN
fuelectenerg-900	637	21	tunability	tunability	NOUN
fuelectenerg-900	637	22	,	,	PUNCT
fuelectenerg-900	637	23	nems	nem	NOUN
fuelectenerg-900	637	24	resonators	resonator	NOUN
fuelectenerg-900	637	25	,	,	PUNCT
fuelectenerg-900	637	26	including	include	VERB
fuelectenerg-900	637	27	2d	2d	NUM
fuelectenerg-900	637	28	(	(	PUNCT
fuelectenerg-900	637	29	graphene	graphene	NOUN
fuelectenerg-900	637	30	)	)	PUNCT
fuelectenerg-900	637	31	resonators	resonator	NOUN
fuelectenerg-900	637	32	,	,	PUNCT
fuelectenerg-900	637	33	provide	provide	VERB
fuelectenerg-900	637	34	a	a	DET
fuelectenerg-900	637	35	promising	promising	ADJ
fuelectenerg-900	637	36	basis	basis	NOUN
fuelectenerg-900	637	37	for	for	ADP
fuelectenerg-900	637	38	future	future	ADJ
fuelectenerg-900	637	39	ultrafast	ultrafast	ADJ
fuelectenerg-900	637	40	communication	communication	NOUN
fuelectenerg-900	637	41	systems	system	NOUN
fuelectenerg-900	637	42	.	.	PUNCT
fuelectenerg-900	638	1	the	the	DET
fuelectenerg-900	638	2	studies	study	NOUN
fuelectenerg-900	638	3	in	in	ADP
fuelectenerg-900	638	4	the	the	DET
fuelectenerg-900	638	5	field	field	NOUN
fuelectenerg-900	638	6	of	of	ADP
fuelectenerg-900	638	7	nems	nem	NOUN
fuelectenerg-900	638	8	are	be	AUX
fuelectenerg-900	638	9	at	at	ADP
fuelectenerg-900	638	10	the	the	DET
fuelectenerg-900	638	11	forefront	forefront	NOUN
fuelectenerg-900	638	12	of	of	ADP
fuelectenerg-900	638	13	physical	physical	ADJ
fuelectenerg-900	638	14	and	and	CCONJ
fuelectenerg-900	638	15	engineering	engineering	NOUN
fuelectenerg-900	638	16	sciences	science	NOUN
fuelectenerg-900	638	17	.	.	PUNCT
fuelectenerg-900	639	1	however	however	ADV
fuelectenerg-900	639	2	,	,	PUNCT
fuelectenerg-900	639	3	a	a	DET
fuelectenerg-900	639	4	number	number	NOUN
fuelectenerg-900	639	5	of	of	ADP
fuelectenerg-900	639	6	issues	issue	NOUN
fuelectenerg-900	639	7	need	need	VERB
fuelectenerg-900	639	8	to	to	PART
fuelectenerg-900	639	9	be	be	AUX
fuelectenerg-900	639	10	addressed	address	VERB
fuelectenerg-900	639	11	in	in	ADP
fuelectenerg-900	639	12	order	order	NOUN
fuelectenerg-900	639	13	to	to	PART
fuelectenerg-900	639	14	enable	enable	VERB
fuelectenerg-900	639	15	practical	practical	ADJ
fuelectenerg-900	639	16	applications	application	NOUN
fuelectenerg-900	639	17	.	.	PUNCT
fuelectenerg-900	640	1	there	there	PRON
fuelectenerg-900	640	2	are	be	VERB
fuelectenerg-900	640	3	problems	problem	NOUN
fuelectenerg-900	640	4	that	that	PRON
fuelectenerg-900	640	5	remain	remain	VERB
fuelectenerg-900	640	6	to	to	PART
fuelectenerg-900	640	7	be	be	AUX
fuelectenerg-900	640	8	solved	solve	VERB
fuelectenerg-900	640	9	on	on	ADP
fuelectenerg-900	640	10	both	both	CCONJ
fuelectenerg-900	640	11	theoretic	theoretic	ADJ
fuelectenerg-900	640	12	and	and	CCONJ
fuelectenerg-900	640	13	experimental	experimental	ADJ
fuelectenerg-900	640	14	level	level	NOUN
fuelectenerg-900	640	15	.	.	PUNCT
fuelectenerg-900	641	1	most	most	ADJ
fuelectenerg-900	641	2	developments	development	NOUN
fuelectenerg-900	641	3	in	in	ADP
fuelectenerg-900	641	4	this	this	DET
fuelectenerg-900	641	5	field	field	NOUN
fuelectenerg-900	641	6	are	be	AUX
fuelectenerg-900	641	7	currently	currently	ADV
fuelectenerg-900	641	8	confined	confine	VERB
fuelectenerg-900	641	9	to	to	ADP
fuelectenerg-900	641	10	theoretic	theoretic	NOUN
fuelectenerg-900	641	11	models	model	NOUN
fuelectenerg-900	641	12	,	,	PUNCT
fuelectenerg-900	641	13	simulations	simulation	NOUN
fuelectenerg-900	641	14	and	and	CCONJ
fuelectenerg-900	641	15	laboratory	laboratory	NOUN
fuelectenerg-900	641	16	experiments	experiment	NOUN
fuelectenerg-900	641	17	,	,	PUNCT
fuelectenerg-900	641	18	with	with	ADP
fuelectenerg-900	641	19	nems	nems	PROPN
fuelectenerg-900	641	20	components	component	NOUN
fuelectenerg-900	641	21	in	in	ADP
fuelectenerg-900	641	22	a	a	DET
fuelectenerg-900	641	23	prototype	prototype	NOUN
fuelectenerg-900	641	24	stage	stage	NOUN
fuelectenerg-900	641	25	,	,	PUNCT
fuelectenerg-900	641	26	at	at	ADP
fuelectenerg-900	641	27	best	well	ADV
fuelectenerg-900	641	28	.	.	PUNCT
fuelectenerg-900	642	1	noise	noise	NOUN
fuelectenerg-900	642	2	generation	generation	NOUN
fuelectenerg-900	642	3	mechanisms	mechanism	NOUN
fuelectenerg-900	642	4	in	in	ADP
fuelectenerg-900	642	5	mems	mem	NOUN
fuelectenerg-900	642	6	and	and	CCONJ
fuelectenerg-900	642	7	nems	nem	NOUN
fuelectenerg-900	642	8	resonant	resonant	VERB
fuelectenerg-900	642	9	structures	structure	NOUN
fuelectenerg-900	642	10	require	require	VERB
fuelectenerg-900	642	11	further	further	ADJ
fuelectenerg-900	642	12	investigation	investigation	NOUN
fuelectenerg-900	642	13	in	in	ADP
fuelectenerg-900	642	14	order	order	NOUN
fuelectenerg-900	642	15	for	for	SCONJ
fuelectenerg-900	642	16	their	their	PRON
fuelectenerg-900	642	17	ultimate	ultimate	ADJ
fuelectenerg-900	642	18	performances	performance	NOUN
fuelectenerg-900	642	19	to	to	PART
fuelectenerg-900	642	20	be	be	AUX
fuelectenerg-900	642	21	determined	determine	VERB
fuelectenerg-900	642	22	.	.	PUNCT
fuelectenerg-900	643	1	the	the	DET
fuelectenerg-900	643	2	extremely	extremely	ADV
fuelectenerg-900	643	3	low	low	ADJ
fuelectenerg-900	643	4	mass	mass	NOUN
fuelectenerg-900	643	5	and	and	CCONJ
fuelectenerg-900	643	6	their	their	PRON
fuelectenerg-900	643	7	large	large	ADJ
fuelectenerg-900	643	8	surface	surface	NOUN
fuelectenerg-900	643	9	-	-	PUNCT
fuelectenerg-900	643	10	to	to	ADP
fuelectenerg-900	643	11	-	-	PUNCT
fuelectenerg-900	643	12	volume	volume	NOUN
fuelectenerg-900	643	13	ratio	ratio	NOUN
fuelectenerg-900	643	14	make	make	VERB
fuelectenerg-900	643	15	these	these	DET
fuelectenerg-900	643	16	resonators	resonator	NOUN
fuelectenerg-900	643	17	highly	highly	ADV
fuelectenerg-900	643	18	sensitive	sensitive	ADJ
fuelectenerg-900	643	19	to	to	ADP
fuelectenerg-900	643	20	added	add	VERB
fuelectenerg-900	643	21	mass	mass	PROPN
fuelectenerg-900	643	22	.	.	PUNCT
fuelectenerg-900	644	1	therefore	therefore	ADV
fuelectenerg-900	644	2	,	,	PUNCT
fuelectenerg-900	644	3	stochastic	stochastic	ADJ
fuelectenerg-900	644	4	adsorbed	adsorb	VERB
fuelectenerg-900	644	5	mass	mass	NOUN
fuelectenerg-900	644	6	fluctuations	fluctuation	NOUN
fuelectenerg-900	644	7	influence	influence	VERB
fuelectenerg-900	644	8	the	the	DET
fuelectenerg-900	644	9	fluctuations	fluctuation	NOUN
fuelectenerg-900	644	10	of	of	ADP
fuelectenerg-900	644	11	mems	mem	NOUN
fuelectenerg-900	644	12	/	/	SYM
fuelectenerg-900	644	13	nems	nems	PROPN
fuelectenerg-900	644	14	resonator	resonator	NOUN
fuelectenerg-900	644	15	parameters	parameter	NOUN
fuelectenerg-900	644	16	,	,	PUNCT
fuelectenerg-900	644	17	i.e.	i.e.	X
fuelectenerg-900	644	18	they	they	PRON
fuelectenerg-900	644	19	are	be	AUX
fuelectenerg-900	644	20	a	a	DET
fuelectenerg-900	644	21	source	source	NOUN
fuelectenerg-900	644	22	of	of	ADP
fuelectenerg-900	644	23	adsorptiondesorption	adsorptiondesorption	NOUN
fuelectenerg-900	644	24	(	(	PUNCT
fuelectenerg-900	644	25	ad	ad	NOUN
fuelectenerg-900	644	26	)	)	PUNCT
fuelectenerg-900	644	27	noise	noise	NOUN
fuelectenerg-900	644	28	which	which	PRON
fuelectenerg-900	644	29	contributes	contribute	VERB
fuelectenerg-900	644	30	to	to	ADP
fuelectenerg-900	644	31	the	the	DET
fuelectenerg-900	644	32	resonator	resonator	NOUN
fuelectenerg-900	644	33	total	total	NOUN
fuelectenerg-900	644	34	noise	noise	NOUN
fuelectenerg-900	644	35	.	.	PUNCT
fuelectenerg-900	645	1	by	by	ADP
fuelectenerg-900	645	2	analyzing	analyze	VERB
fuelectenerg-900	645	3	the	the	DET
fuelectenerg-900	645	4	ad	ad	NOUN
fuelectenerg-900	645	5	noise	noise	NOUN
fuelectenerg-900	645	6	that	that	PRON
fuelectenerg-900	645	7	becomes	become	VERB
fuelectenerg-900	645	8	prominent	prominent	ADJ
fuelectenerg-900	645	9	as	as	ADP
fuelectenerg-900	645	10	the	the	DET
fuelectenerg-900	645	11	dimensions	dimension	NOUN
fuelectenerg-900	645	12	and	and	CCONJ
fuelectenerg-900	645	13	mass	mass	NOUN
fuelectenerg-900	645	14	of	of	ADP
fuelectenerg-900	645	15	the	the	DET
fuelectenerg-900	645	16	components	component	NOUN
fuelectenerg-900	645	17	decrease	decrease	NOUN
fuelectenerg-900	645	18	,	,	PUNCT
fuelectenerg-900	645	19	we	we	PRON
fuelectenerg-900	645	20	contributed	contribute	VERB
fuelectenerg-900	645	21	to	to	ADP
fuelectenerg-900	645	22	the	the	DET
fuelectenerg-900	645	23	theory	theory	NOUN
fuelectenerg-900	645	24	of	of	ADP
fuelectenerg-900	645	25	noise	noise	NOUN
fuelectenerg-900	645	26	in	in	ADP
fuelectenerg-900	645	27	mems	mem	NOUN
fuelectenerg-900	645	28	and	and	CCONJ
fuelectenerg-900	645	29	nems	nem	NOUN
fuelectenerg-900	645	30	resonators	resonator	NOUN
fuelectenerg-900	645	31	,	,	PUNCT
fuelectenerg-900	645	32	and	and	CCONJ
fuelectenerg-900	645	33	subsequently	subsequently	ADV
fuelectenerg-900	645	34	to	to	ADP
fuelectenerg-900	645	35	the	the	DET
fuelectenerg-900	645	36	theory	theory	NOUN
fuelectenerg-900	645	37	of	of	ADP
fuelectenerg-900	645	38	phase	phase	NOUN
fuelectenerg-900	645	39	noise	noise	NOUN
fuelectenerg-900	645	40	in	in	ADP
fuelectenerg-900	645	41	oscillators	oscillator	NOUN
fuelectenerg-900	645	42	using	use	VERB
fuelectenerg-900	645	43	rf	rf	ADJ
fuelectenerg-900	645	44	mems	mem	NOUN
fuelectenerg-900	645	45	/	/	SYM
fuelectenerg-900	645	46	nems	nem	NOUN
fuelectenerg-900	645	47	resonators	resonator	NOUN
fuelectenerg-900	645	48	as	as	ADP
fuelectenerg-900	645	49	frequency	frequency	NOUN
fuelectenerg-900	645	50	determining	determine	VERB
fuelectenerg-900	645	51	elements	element	NOUN
fuelectenerg-900	645	52	.	.	PUNCT
fuelectenerg-900	646	1	the	the	DET
fuelectenerg-900	646	2	theoretical	theoretical	ADJ
fuelectenerg-900	646	3	model	model	NOUN
fuelectenerg-900	646	4	of	of	ADP
fuelectenerg-900	646	5	ad	ad	NOUN
fuelectenerg-900	646	6	phase	phase	NOUN
fuelectenerg-900	646	7	noise	noise	NOUN
fuelectenerg-900	646	8	enables	enable	VERB
fuelectenerg-900	646	9	prediction	prediction	NOUN
fuelectenerg-900	646	10	of	of	ADP
fuelectenerg-900	646	11	ad	ad	NOUN
fuelectenerg-900	646	12	noise	noise	NOUN
fuelectenerg-900	646	13	during	during	ADP
fuelectenerg-900	646	14	the	the	DET
fuelectenerg-900	646	15	design	design	NOUN
fuelectenerg-900	646	16	of	of	ADP
fuelectenerg-900	646	17	such	such	ADJ
fuelectenerg-900	646	18	components	component	NOUN
fuelectenerg-900	646	19	in	in	ADP
fuelectenerg-900	646	20	order	order	NOUN
fuelectenerg-900	646	21	to	to	PART
fuelectenerg-900	646	22	identify	identify	VERB
fuelectenerg-900	646	23	the	the	DET
fuelectenerg-900	646	24	dominant	dominant	ADJ
fuelectenerg-900	646	25	noise	noise	NOUN
fuelectenerg-900	646	26	generating	generating	NOUN
fuelectenerg-900	646	27	mechanism	mechanism	NOUN
fuelectenerg-900	646	28	,	,	PUNCT
fuelectenerg-900	646	29	and	and	CCONJ
fuelectenerg-900	646	30	then	then	ADV
fuelectenerg-900	646	31	optimization	optimization	NOUN
fuelectenerg-900	646	32	of	of	ADP
fuelectenerg-900	646	33	the	the	DET
fuelectenerg-900	646	34	resonator	resonator	NOUN
fuelectenerg-900	646	35	parameters	parameter	NOUN
fuelectenerg-900	646	36	and	and	CCONJ
fuelectenerg-900	646	37	operating	operating	NOUN
fuelectenerg-900	646	38	conditions	condition	NOUN
fuelectenerg-900	646	39	in	in	ADP
fuelectenerg-900	646	40	terms	term	NOUN
fuelectenerg-900	646	41	of	of	ADP
fuelectenerg-900	646	42	noise	noise	NOUN
fuelectenerg-900	646	43	minimization	minimization	NOUN
fuelectenerg-900	646	44	.	.	PUNCT
fuelectenerg-900	647	1	acknowledgement	acknowledgement	NOUN
fuelectenerg-900	647	2	.	.	PUNCT
fuelectenerg-900	648	1	this	this	DET
fuelectenerg-900	648	2	work	work	NOUN
fuelectenerg-900	648	3	was	be	AUX
fuelectenerg-900	648	4	funded	fund	VERB
fuelectenerg-900	648	5	by	by	ADP
fuelectenerg-900	648	6	the	the	DET
fuelectenerg-900	648	7	serbian	serbian	PROPN
fuelectenerg-900	648	8	ministry	ministry	PROPN
fuelectenerg-900	648	9	of	of	ADP
fuelectenerg-900	648	10	education	education	PROPN
fuelectenerg-900	648	11	,	,	PUNCT
fuelectenerg-900	648	12	science	science	NOUN
fuelectenerg-900	648	13	and	and	CCONJ
fuelectenerg-900	648	14	technological	technological	ADJ
fuelectenerg-900	648	15	development	development	NOUN
fuelectenerg-900	648	16	(	(	PUNCT
fuelectenerg-900	648	17	project	project	NOUN
fuelectenerg-900	648	18	tr	tr	VERB
fuelectenerg-900	648	19	32008	32008	NUM
fuelectenerg-900	648	20	)	)	PUNCT
fuelectenerg-900	648	21	and	and	CCONJ
fuelectenerg-900	648	22	by	by	ADP
fuelectenerg-900	648	23	the	the	DET
fuelectenerg-900	648	24	serbian	serbian	PROPN
fuelectenerg-900	648	25	academy	academy	PROPN
fuelectenerg-900	648	26	of	of	ADP
fuelectenerg-900	648	27	sciences	sciences	PROPN
fuelectenerg-900	648	28	and	and	CCONJ
fuelectenerg-900	648	29	arts	art	NOUN
fuelectenerg-900	648	30	(	(	PUNCT
fuelectenerg-900	648	31	project	project	NOUN
fuelectenerg-900	648	32	f/150	f/150	PROPN
fuelectenerg-900	648	33	)	)	PUNCT
fuelectenerg-900	648	34	.	.	PUNCT
fuelectenerg-900	649	1	the	the	DET
fuelectenerg-900	649	2	authors	author	NOUN
fuelectenerg-900	649	3	would	would	AUX
fuelectenerg-900	649	4	like	like	VERB
fuelectenerg-900	649	5	to	to	PART
fuelectenerg-900	649	6	express	express	VERB
fuelectenerg-900	649	7	their	their	PRON
fuelectenerg-900	649	8	gratitude	gratitude	NOUN
fuelectenerg-900	649	9	to	to	PART
fuelectenerg-900	649	10	prof	prof	PROPN
fuelectenerg-900	649	11	.	.	PUNCT
fuelectenerg-900	650	1	dr	dr	PROPN
fuelectenerg-900	650	2	.	.	PROPN
fuelectenerg-900	650	3	gradimir	gradimir	PROPN
fuelectenerg-900	650	4	milovanović	milovanović	PROPN
fuelectenerg-900	650	5	,	,	PUNCT
fuelectenerg-900	650	6	full	full	ADJ
fuelectenerg-900	650	7	member	member	NOUN
fuelectenerg-900	650	8	of	of	ADP
fuelectenerg-900	650	9	the	the	DET
fuelectenerg-900	650	10	serbian	serbian	PROPN
fuelectenerg-900	650	11	academy	academy	PROPN
fuelectenerg-900	650	12	of	of	ADP
fuelectenerg-900	650	13	sciences	sciences	PROPN
fuelectenerg-900	650	14	and	and	CCONJ
fuelectenerg-900	650	15	arts	art	NOUN
fuelectenerg-900	650	16	,	,	PUNCT
fuelectenerg-900	650	17	for	for	ADP
fuelectenerg-900	650	18	his	his	PRON
fuelectenerg-900	650	19	contribution	contribution	NOUN
fuelectenerg-900	650	20	in	in	ADP
fuelectenerg-900	650	21	solving	solve	VERB
fuelectenerg-900	650	22	mathematical	mathematical	ADJ
fuelectenerg-900	650	23	problems	problem	NOUN
fuelectenerg-900	650	24	.	.	PUNCT
fuelectenerg-900	651	1	references	reference	NOUN
fuelectenerg-900	651	2	[	[	X
fuelectenerg-900	651	3	1	1	X
fuelectenerg-900	651	4	]	]	PUNCT
fuelectenerg-900	651	5	j.	j.	PROPN
fuelectenerg-900	651	6	basu	basu	PROPN
fuelectenerg-900	651	7	and	and	CCONJ
fuelectenerg-900	651	8	t.	t.	PROPN
fuelectenerg-900	651	9	k.	k.	PROPN
fuelectenerg-900	651	10	bhattacharyya	bhattacharyya	PROPN
fuelectenerg-900	651	11	,	,	PUNCT
fuelectenerg-900	651	12	"	"	PUNCT
fuelectenerg-900	651	13	microelectromechanical	microelectromechanical	ADJ
fuelectenerg-900	651	14	resonators	resonator	NOUN
fuelectenerg-900	651	15	for	for	ADP
fuelectenerg-900	651	16	radio	radio	NOUN
fuelectenerg-900	651	17	frequency	frequency	NOUN
fuelectenerg-900	651	18	communication	communication	NOUN
fuelectenerg-900	651	19	applications	application	NOUN
fuelectenerg-900	651	20	"	"	PUNCT
fuelectenerg-900	651	21	,	,	PUNCT
fuelectenerg-900	651	22	microsystem	microsystem	NOUN
fuelectenerg-900	651	23	technologies	technology	NOUN
fuelectenerg-900	651	24	,	,	PUNCT
fuelectenerg-900	651	25	vol	vol	NOUN
fuelectenerg-900	651	26	.	.	PROPN
fuelectenerg-900	651	27	17	17	NUM
fuelectenerg-900	651	28	,	,	PUNCT
fuelectenerg-900	651	29	pp	pp	ADJ
fuelectenerg-900	651	30	.	.	PUNCT
fuelectenerg-900	652	1	1557	1557	NUM
fuelectenerg-900	652	2	-	-	SYM
fuelectenerg-900	652	3	1580	1580	NUM
fuelectenerg-900	652	4	,	,	PUNCT
fuelectenerg-900	652	5	2011	2011	NUM
fuelectenerg-900	652	6	.	.	PUNCT
fuelectenerg-900	653	1	[	[	X
fuelectenerg-900	653	2	2	2	NUM
fuelectenerg-900	653	3	]	]	X
fuelectenerg-900	653	4	b.	b.	PROPN
fuelectenerg-900	653	5	kim	kim	PROPN
fuelectenerg-900	653	6	,	,	PUNCT
fuelectenerg-900	653	7	m.	m.	NOUN
fuelectenerg-900	653	8	a.	a.	PROPN
fuelectenerg-900	653	9	hopcroft	hopcroft	ADV
fuelectenerg-900	653	10	and	and	CCONJ
fuelectenerg-900	653	11	r.	r.	PROPN
fuelectenerg-900	653	12	n.	n.	PROPN
fuelectenerg-900	653	13	candler	candler	PROPN
fuelectenerg-900	653	14	,	,	PUNCT
fuelectenerg-900	653	15	"	"	PUNCT
fuelectenerg-900	653	16	silicon	silicon	NOUN
fuelectenerg-900	653	17	mems	mem	NOUN
fuelectenerg-900	653	18	resonators	resonator	NOUN
fuelectenerg-900	653	19	for	for	ADP
fuelectenerg-900	653	20	timing	time	VERB
fuelectenerg-900	653	21	applications	application	NOUN
fuelectenerg-900	653	22	"	"	PUNCT
fuelectenerg-900	653	23	,	,	PUNCT
fuelectenerg-900	653	24	in	in	ADP
fuelectenerg-900	653	25	microelectronics	microelectronic	NOUN
fuelectenerg-900	653	26	to	to	ADP
fuelectenerg-900	653	27	nanoelectronics	nanoelectronic	NOUN
fuelectenerg-900	653	28	materials	material	NOUN
fuelectenerg-900	653	29	,	,	PUNCT
fuelectenerg-900	653	30	devices	device	NOUN
fuelectenerg-900	653	31	&	&	CCONJ
fuelectenerg-900	653	32	manu	manu	PROPN
fuelectenerg-900	653	33	-	-	PUNCT
fuelectenerg-900	653	34	facturability	facturability	NOUN
fuelectenerg-900	653	35	,	,	PUNCT
fuelectenerg-900	653	36	a.	a.	PROPN
fuelectenerg-900	653	37	b.	b.	PROPN
fuelectenerg-900	653	38	kaul	kaul	PROPN
fuelectenerg-900	653	39	,	,	PUNCT
fuelectenerg-900	653	40	ed	ed	NOUN
fuelectenerg-900	653	41	.	.	PROPN
fuelectenerg-900	653	42	,	,	PUNCT
fuelectenerg-900	653	43	crc	crc	NOUN
fuelectenerg-900	653	44	press	press	NOUN
fuelectenerg-900	653	45	,	,	PUNCT
fuelectenerg-900	653	46	2012	2012	NUM
fuelectenerg-900	653	47	,	,	PUNCT
fuelectenerg-900	653	48	pp	pp	ADJ
fuelectenerg-900	653	49	.	.	PUNCT
fuelectenerg-900	654	1	79	79	NUM
fuelectenerg-900	654	2	-	-	SYM
fuelectenerg-900	654	3	108	108	NUM
fuelectenerg-900	654	4	.	.	PUNCT
fuelectenerg-900	655	1	[	[	X
fuelectenerg-900	655	2	3	3	X
fuelectenerg-900	655	3	]	]	X
fuelectenerg-900	655	4	j.	j.	PROPN
fuelectenerg-900	655	5	t.	t.	PROPN
fuelectenerg-900	655	6	m.	m.	PROPN
fuelectenerg-900	655	7	van	van	PROPN
fuelectenerg-900	655	8	beek	beek	PROPN
fuelectenerg-900	655	9	and	and	CCONJ
fuelectenerg-900	655	10	r.	r.	PROPN
fuelectenerg-900	655	11	puers	puer	NOUN
fuelectenerg-900	655	12	,	,	PUNCT
fuelectenerg-900	655	13	"	"	PUNCT
fuelectenerg-900	655	14	a	a	DET
fuelectenerg-900	655	15	review	review	NOUN
fuelectenerg-900	655	16	of	of	ADP
fuelectenerg-900	655	17	mems	mem	NOUN
fuelectenerg-900	655	18	oscillators	oscillator	NOUN
fuelectenerg-900	655	19	for	for	ADP
fuelectenerg-900	655	20	frequency	frequency	NOUN
fuelectenerg-900	655	21	reference	reference	NOUN
fuelectenerg-900	655	22	and	and	CCONJ
fuelectenerg-900	655	23	timing	timing	NOUN
fuelectenerg-900	655	24	applications	application	NOUN
fuelectenerg-900	655	25	"	"	PUNCT
fuelectenerg-900	655	26	,	,	PUNCT
fuelectenerg-900	655	27	j.	j.	PROPN
fuelectenerg-900	655	28	micromech	micromech	PROPN
fuelectenerg-900	655	29	.	.	PUNCT
fuelectenerg-900	656	1	microeng	microeng	PROPN
fuelectenerg-900	656	2	.	.	PUNCT
fuelectenerg-900	656	3	,	,	PUNCT
fuelectenerg-900	656	4	vol	vol	NOUN
fuelectenerg-900	656	5	.	.	PROPN
fuelectenerg-900	657	1	22	22	NUM
fuelectenerg-900	657	2	,	,	PUNCT
fuelectenerg-900	657	3	pp	pp	ADJ
fuelectenerg-900	657	4	.	.	PUNCT
fuelectenerg-900	658	1	013001	013001	NUM
fuelectenerg-900	658	2	1	1	NUM
fuelectenerg-900	658	3	-	-	SYM
fuelectenerg-900	658	4	35	35	NUM
fuelectenerg-900	658	5	,	,	PUNCT
fuelectenerg-900	658	6	2012	2012	NUM
fuelectenerg-900	658	7	.	.	PUNCT
fuelectenerg-900	659	1	376	376	NUM
fuelectenerg-900	659	2	i.	i.	PROPN
fuelectenerg-900	659	3	jokić	jokić	PROPN
fuelectenerg-900	659	4	,	,	PUNCT
fuelectenerg-900	659	5	m.	m.	NOUN
fuelectenerg-900	659	6	frantlović	frantlović	NOUN
fuelectenerg-900	659	7	,	,	PUNCT
fuelectenerg-900	659	8	z.	z.	PROPN
fuelectenerg-900	659	9	djurić	djurić	PROPN
fuelectenerg-900	659	10	,	,	PUNCT
fuelectenerg-900	659	11	m.	m.	NOUN
fuelectenerg-900	659	12	l.	l.	PROPN
fuelectenerg-900	659	13	dukić	dukić	PROPN
fuelectenerg-900	660	1	[	[	X
fuelectenerg-900	660	2	4	4	NUM
fuelectenerg-900	660	3	]	]	X
fuelectenerg-900	660	4	c.	c.	PROPN
fuelectenerg-900	660	5	t.-c	t.-c	PROPN
fuelectenerg-900	660	6	.	.	PUNCT
fuelectenerg-900	661	1	nguyen	nguyen	PROPN
fuelectenerg-900	661	2	,	,	PUNCT
fuelectenerg-900	661	3	"	"	PUNCT
fuelectenerg-900	661	4	vibrating	vibrate	VERB
fuelectenerg-900	661	5	rf	rf	ADJ
fuelectenerg-900	661	6	mems	mem	NOUN
fuelectenerg-900	661	7	overview	overview	NOUN
fuelectenerg-900	661	8	:	:	PUNCT
fuelectenerg-900	661	9	applications	application	NOUN
fuelectenerg-900	661	10	to	to	PART
fuelectenerg-900	661	11	wireless	wireless	ADJ
fuelectenerg-900	661	12	communications	communication	NOUN
fuelectenerg-900	661	13	"	"	PUNCT
fuelectenerg-900	661	14	,	,	PUNCT
fuelectenerg-900	661	15	in	in	ADP
fuelectenerg-900	661	16	proceedings	proceeding	NOUN
fuelectenerg-900	661	17	of	of	ADP
fuelectenerg-900	661	18	spie	spie	NOUN
fuelectenerg-900	661	19	:	:	PUNCT
fuelectenerg-900	661	20	micromachining	micromachining	NOUN
fuelectenerg-900	661	21	and	and	CCONJ
fuelectenerg-900	661	22	microfabrication	microfabrication	NOUN
fuelectenerg-900	661	23	process	process	NOUN
fuelectenerg-900	661	24	technology	technology	NOUN
fuelectenerg-900	661	25	,	,	PUNCT
fuelectenerg-900	661	26	vol	vol	NOUN
fuelectenerg-900	661	27	.	.	PUNCT
fuelectenerg-900	661	28	5715	5715	NUM
fuelectenerg-900	661	29	,	,	PUNCT
fuelectenerg-900	661	30	photonics	photonics	PROPN
fuelectenerg-900	661	31	west	west	NOUN
fuelectenerg-900	661	32	:	:	PUNCT
fuelectenerg-900	661	33	moems	moem	NOUN
fuelectenerg-900	661	34	-	-	PUNCT
fuelectenerg-900	661	35	mems	mem	NOUN
fuelectenerg-900	661	36	2005	2005	NUM
fuelectenerg-900	661	37	,	,	PUNCT
fuelectenerg-900	661	38	san	san	PROPN
fuelectenerg-900	661	39	jose	jose	PROPN
fuelectenerg-900	661	40	,	,	PUNCT
fuelectenerg-900	661	41	california	california	PROPN
fuelectenerg-900	661	42	,	,	PUNCT
fuelectenerg-900	661	43	2005	2005	NUM
fuelectenerg-900	661	44	,	,	PUNCT
fuelectenerg-900	661	45	pp	pp	ADJ
fuelectenerg-900	661	46	.	.	PUNCT
fuelectenerg-900	662	1	11	11	NUM
fuelectenerg-900	662	2	-	-	SYM
fuelectenerg-900	662	3	25	25	NUM
fuelectenerg-900	662	4	.	.	PUNCT
fuelectenerg-900	663	1	[	[	X
fuelectenerg-900	663	2	5	5	X
fuelectenerg-900	663	3	]	]	X
fuelectenerg-900	663	4	d.	d.	PROPN
fuelectenerg-900	663	5	e.	e.	PROPN
fuelectenerg-900	663	6	serrano	serrano	PROPN
fuelectenerg-900	663	7	,	,	PUNCT
fuelectenerg-900	663	8	r.	r.	PROPN
fuelectenerg-900	663	9	tabrizian	tabrizian	PROPN
fuelectenerg-900	663	10	and	and	CCONJ
fuelectenerg-900	663	11	f.	f.	PROPN
fuelectenerg-900	663	12	ayazi	ayazi	PROPN
fuelectenerg-900	663	13	,	,	PUNCT
fuelectenerg-900	663	14	"	"	PUNCT
fuelectenerg-900	663	15	tunable	tunable	ADJ
fuelectenerg-900	663	16	piezoelectric	piezoelectric	NOUN
fuelectenerg-900	663	17	mems	mem	NOUN
fuelectenerg-900	663	18	resonators	resonator	NOUN
fuelectenerg-900	663	19	for	for	ADP
fuelectenerg-900	663	20	real	real	ADJ
fuelectenerg-900	663	21	-	-	PUNCT
fuelectenerg-900	663	22	time	time	NOUN
fuelectenerg-900	663	23	clock	clock	NOUN
fuelectenerg-900	663	24	"	"	PUNCT
fuelectenerg-900	663	25	,	,	PUNCT
fuelectenerg-900	663	26	in	in	ADP
fuelectenerg-900	663	27	proceedings	proceeding	NOUN
fuelectenerg-900	663	28	of	of	ADP
fuelectenerg-900	663	29	the	the	DET
fuelectenerg-900	663	30	joint	joint	ADJ
fuelectenerg-900	663	31	conference	conference	NOUN
fuelectenerg-900	663	32	of	of	ADP
fuelectenerg-900	663	33	the	the	DET
fuelectenerg-900	663	34	ieee	ieee	NOUN
fuelectenerg-900	663	35	international	international	ADJ
fuelectenerg-900	663	36	frequency	frequency	NOUN
fuelectenerg-900	663	37	control	control	NOUN
fuelectenerg-900	663	38	and	and	CCONJ
fuelectenerg-900	663	39	the	the	DET
fuelectenerg-900	663	40	european	european	ADJ
fuelectenerg-900	663	41	frequency	frequency	NOUN
fuelectenerg-900	663	42	and	and	CCONJ
fuelectenerg-900	663	43	time	time	NOUN
fuelectenerg-900	663	44	forum	forum	PROPN
fuelectenerg-900	663	45	(	(	PUNCT
fuelectenerg-900	663	46	fcs	fcs	PROPN
fuelectenerg-900	663	47	)	)	PUNCT
fuelectenerg-900	663	48	,	,	PUNCT
fuelectenerg-900	663	49	san	san	PROPN
fuelectenerg-900	663	50	fransisco	fransisco	PROPN
fuelectenerg-900	663	51	,	,	PUNCT
fuelectenerg-900	663	52	ca	ca	PROPN
fuelectenerg-900	663	53	,	,	PUNCT
fuelectenerg-900	663	54	2011	2011	NUM
fuelectenerg-900	663	55	,	,	PUNCT
fuelectenerg-900	663	56	pp	pp	ADJ
fuelectenerg-900	663	57	.	.	PUNCT
fuelectenerg-900	664	1	1	1	NUM
fuelectenerg-900	664	2	-	-	SYM
fuelectenerg-900	664	3	4	4	NUM
fuelectenerg-900	664	4	.	.	PUNCT
fuelectenerg-900	665	1	[	[	X
fuelectenerg-900	665	2	6	6	NUM
fuelectenerg-900	665	3	]	]	PUNCT
fuelectenerg-900	665	4	i.	i.	NOUN
fuelectenerg-900	665	5	voiculescu	voiculescu	PROPN
fuelectenerg-900	665	6	and	and	CCONJ
fuelectenerg-900	665	7	a.	a.	PROPN
fuelectenerg-900	665	8	n.	n.	PROPN
fuelectenerg-900	665	9	nordin	nordin	PROPN
fuelectenerg-900	665	10	,	,	PUNCT
fuelectenerg-900	665	11	"	"	PUNCT
fuelectenerg-900	665	12	acoustic	acoustic	ADJ
fuelectenerg-900	665	13	wave	wave	NOUN
fuelectenerg-900	665	14	based	base	VERB
fuelectenerg-900	665	15	mems	mem	NOUN
fuelectenerg-900	665	16	devices	device	NOUN
fuelectenerg-900	665	17	,	,	PUNCT
fuelectenerg-900	665	18	development	development	NOUN
fuelectenerg-900	665	19	and	and	CCONJ
fuelectenerg-900	665	20	applications	application	NOUN
fuelectenerg-900	665	21	"	"	PUNCT
fuelectenerg-900	665	22	,	,	PUNCT
fuelectenerg-900	665	23	in	in	ADP
fuelectenerg-900	665	24	:	:	PUNCT
fuelectenerg-900	665	25	microelectromechanical	microelectromechanical	ADJ
fuelectenerg-900	665	26	systems	system	NOUN
fuelectenerg-900	665	27	and	and	CCONJ
fuelectenerg-900	665	28	devices	device	NOUN
fuelectenerg-900	665	29	,	,	PUNCT
fuelectenerg-900	665	30	n.	n.	PROPN
fuelectenerg-900	665	31	islam	islam	PROPN
fuelectenerg-900	665	32	,	,	PUNCT
fuelectenerg-900	665	33	ed	ed	PROPN
fuelectenerg-900	665	34	.	.	PROPN
fuelectenerg-900	665	35	,	,	PUNCT
fuelectenerg-900	665	36	intech	intech	PROPN
fuelectenerg-900	665	37	,	,	PUNCT
fuelectenerg-900	665	38	2012	2012	NUM
fuelectenerg-900	665	39	,	,	PUNCT
fuelectenerg-900	665	40	chapter	chapter	NOUN
fuelectenerg-900	665	41	4	4	NUM
fuelectenerg-900	665	42	,	,	PUNCT
fuelectenerg-900	665	43	pp	pp	ADJ
fuelectenerg-900	665	44	.	.	PUNCT
fuelectenerg-900	666	1	65	65	NUM
fuelectenerg-900	666	2	-	-	SYM
fuelectenerg-900	666	3	86	86	NUM
fuelectenerg-900	666	4	.	.	PUNCT
fuelectenerg-900	667	1	[	[	X
fuelectenerg-900	667	2	7	7	X
fuelectenerg-900	667	3	]	]	X
fuelectenerg-900	667	4	r.	r.	NOUN
fuelectenerg-900	667	5	tabrizian	tabrizian	PROPN
fuelectenerg-900	667	6	,	,	PUNCT
fuelectenerg-900	667	7	m.	m.	PROPN
fuelectenerg-900	667	8	rais	rais	PROPN
fuelectenerg-900	667	9	-	-	PUNCT
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fuelectenerg-900	667	12	f.	f.	PROPN
fuelectenerg-900	667	13	ayazi	ayazi	PROPN
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fuelectenerg-900	667	15	"	"	PUNCT
fuelectenerg-900	667	16	effect	effect	NOUN
fuelectenerg-900	667	17	of	of	ADP
fuelectenerg-900	667	18	phonon	phonon	NOUN
fuelectenerg-900	667	19	interactions	interaction	NOUN
fuelectenerg-900	667	20	on	on	ADP
fuelectenerg-900	667	21	limiting	limit	VERB
fuelectenerg-900	667	22	the	the	DET
fuelectenerg-900	667	23	f·q	f·q	ADJ
fuelectenerg-900	667	24	product	product	NOUN
fuelectenerg-900	667	25	of	of	ADP
fuelectenerg-900	667	26	micromechanical	micromechanical	ADJ
fuelectenerg-900	667	27	resonators	resonator	NOUN
fuelectenerg-900	667	28	"	"	PUNCT
fuelectenerg-900	667	29	,	,	PUNCT
fuelectenerg-900	667	30	in	in	ADP
fuelectenerg-900	667	31	proceedings	proceeding	NOUN
fuelectenerg-900	667	32	of	of	ADP
fuelectenerg-900	667	33	the	the	DET
fuelectenerg-900	667	34	international	international	ADJ
fuelectenerg-900	667	35	solid	solid	ADJ
fuelectenerg-900	667	36	-	-	PUNCT
fuelectenerg-900	667	37	state	state	NOUN
fuelectenerg-900	667	38	sensors	sensor	NOUN
fuelectenerg-900	667	39	,	,	PUNCT
fuelectenerg-900	667	40	actuators	actuator	NOUN
fuelectenerg-900	667	41	and	and	CCONJ
fuelectenerg-900	667	42	microsystems	microsystem	NOUN
fuelectenerg-900	667	43	conference	conference	NOUN
fuelectenerg-900	667	44	(	(	PUNCT
fuelectenerg-900	667	45	transducers	transducer	NOUN
fuelectenerg-900	667	46	2009	2009	NUM
fuelectenerg-900	667	47	)	)	PUNCT
fuelectenerg-900	667	48	,	,	PUNCT
fuelectenerg-900	667	49	denver	denver	PROPN
fuelectenerg-900	667	50	,	,	PUNCT
fuelectenerg-900	667	51	co	co	NOUN
fuelectenerg-900	667	52	,	,	PUNCT
fuelectenerg-900	667	53	2009	2009	NUM
fuelectenerg-900	667	54	,	,	PUNCT
fuelectenerg-900	667	55	pp	pp	ADV
fuelectenerg-900	667	56	.	.	PUNCT
fuelectenerg-900	667	57	2131–2134	2131–2134	NUM
fuelectenerg-900	667	58	.	.	PUNCT
fuelectenerg-900	668	1	[	[	X
fuelectenerg-900	668	2	8	8	NUM
fuelectenerg-900	668	3	]	]	X
fuelectenerg-900	668	4	c.	c.	PROPN
fuelectenerg-900	668	5	zuo	zuo	PROPN
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fuelectenerg-900	668	7	j.	j.	PROPN
fuelectenerg-900	668	8	van	van	PROPN
fuelectenerg-900	668	9	der	der	PROPN
fuelectenerg-900	668	10	spiegel	spiegel	PROPN
fuelectenerg-900	668	11	and	and	CCONJ
fuelectenerg-900	668	12	g.	g.	PROPN
fuelectenerg-900	668	13	piazza	piazza	PROPN
fuelectenerg-900	668	14	,	,	PUNCT
fuelectenerg-900	668	15	"	"	PUNCT
fuelectenerg-900	668	16	1.05	1.05	NUM
fuelectenerg-900	668	17	-	-	PUNCT
fuelectenerg-900	668	18	ghz	ghz	NOUN
fuelectenerg-900	668	19	cmos	cmos	NOUN
fuelectenerg-900	668	20	oscillator	oscillator	NOUN
fuelectenerg-900	668	21	based	base	VERB
fuelectenerg-900	668	22	on	on	ADP
fuelectenerg-900	668	23	lateral	lateral	ADJ
fuelectenerg-900	668	24	field	field	NOUN
fuelectenerg-900	668	25	-	-	PUNCT
fuelectenerg-900	668	26	excited	excite	VERB
fuelectenerg-900	668	27	piezoelectric	piezoelectric	NOUN
fuelectenerg-900	668	28	ain	ain	NOUN
fuelectenerg-900	668	29	contour	contour	NOUN
fuelectenerg-900	668	30	mode	mode	NOUN
fuelectenerg-900	668	31	mems	mem	NOUN
fuelectenerg-900	668	32	resonators	resonator	NOUN
fuelectenerg-900	668	33	"	"	PUNCT
fuelectenerg-900	668	34	,	,	PUNCT
fuelectenerg-900	668	35	ieee	ieee	PROPN
fuelectenerg-900	668	36	trans	trans	PROPN
fuelectenerg-900	668	37	.	.	PUNCT
fuelectenerg-900	669	1	ultrason	ultrason	PROPN
fuelectenerg-900	669	2	.	.	PUNCT
fuelectenerg-900	670	1	ferroelectr	ferroelectr	PROPN
fuelectenerg-900	670	2	.	.	PUNCT
fuelectenerg-900	670	3	freq	freq	PROPN
fuelectenerg-900	670	4	.	.	PUNCT
fuelectenerg-900	671	1	control	control	NOUN
fuelectenerg-900	671	2	,	,	PUNCT
fuelectenerg-900	671	3	vol	vol	NOUN
fuelectenerg-900	671	4	.	.	PROPN
fuelectenerg-900	671	5	57	57	NUM
fuelectenerg-900	671	6	,	,	PUNCT
fuelectenerg-900	671	7	pp	pp	ADJ
fuelectenerg-900	671	8	.	.	PUNCT
fuelectenerg-900	672	1	82	82	NUM
fuelectenerg-900	672	2	-	-	SYM
fuelectenerg-900	672	3	87	87	NUM
fuelectenerg-900	672	4	,	,	PUNCT
fuelectenerg-900	672	5	2010	2010	NUM
fuelectenerg-900	672	6	.	.	PUNCT
fuelectenerg-900	673	1	[	[	X
fuelectenerg-900	673	2	9	9	NUM
fuelectenerg-900	673	3	]	]	X
fuelectenerg-900	673	4	g.	g.	NOUN
fuelectenerg-900	673	5	piazza	piazza	PROPN
fuelectenerg-900	673	6	,	,	PUNCT
fuelectenerg-900	673	7	p.	p.	PROPN
fuelectenerg-900	673	8	j.	j.	PROPN
fuelectenerg-900	673	9	stephanou	stephanou	PROPN
fuelectenerg-900	673	10	,	,	PUNCT
fuelectenerg-900	673	11	j.	j.	PROPN
fuelectenerg-900	673	12	m.	m.	PROPN
fuelectenerg-900	673	13	porter	porter	PROPN
fuelectenerg-900	673	14	,	,	PUNCT
fuelectenerg-900	673	15	m.	m.	PROPN
fuelectenerg-900	673	16	b.	b.	PROPN
fuelectenerg-900	673	17	j.	j.	PROPN
fuelectenerg-900	673	18	wijesundara	wijesundara	PROPN
fuelectenerg-900	673	19	and	and	CCONJ
fuelectenerg-900	673	20	a.	a.	PROPN
fuelectenerg-900	673	21	p.	p.	PROPN
fuelectenerg-900	673	22	pisano	pisano	PROPN
fuelectenerg-900	673	23	,	,	PUNCT
fuelectenerg-900	673	24	"	"	PUNCT
fuelectenerg-900	673	25	low	low	ADJ
fuelectenerg-900	673	26	motional	motional	ADJ
fuelectenerg-900	673	27	resistance	resistance	NOUN
fuelectenerg-900	673	28	ring	ring	NOUN
fuelectenerg-900	673	29	-	-	PUNCT
fuelectenerg-900	673	30	shaped	shape	VERB
fuelectenerg-900	673	31	contour	contour	NOUN
fuelectenerg-900	673	32	-	-	PUNCT
fuelectenerg-900	673	33	mode	mode	NOUN
fuelectenerg-900	673	34	aluminium	aluminium	NOUN
fuelectenerg-900	673	35	nitride	nitride	ADJ
fuelectenerg-900	673	36	piezoelectric	piezoelectric	NOUN
fuelectenerg-900	673	37	micromechanical	micromechanical	ADJ
fuelectenerg-900	673	38	resonators	resonator	NOUN
fuelectenerg-900	673	39	for	for	ADP
fuelectenerg-900	673	40	uhf	uhf	PROPN
fuelectenerg-900	673	41	applications	application	NOUN
fuelectenerg-900	673	42	"	"	PUNCT
fuelectenerg-900	673	43	,	,	PUNCT
fuelectenerg-900	673	44	in	in	ADP
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fuelectenerg-900	673	46	of	of	ADP
fuelectenerg-900	673	47	the	the	DET
fuelectenerg-900	673	48	18th	18th	ADJ
fuelectenerg-900	673	49	ieee	ieee	NOUN
fuelectenerg-900	673	50	international	international	ADJ
fuelectenerg-900	673	51	conference	conference	NOUN
fuelectenerg-900	673	52	on	on	ADP
fuelectenerg-900	673	53	micro	micro	ADJ
fuelectenerg-900	673	54	electromechanical	electromechanical	ADJ
fuelectenerg-900	673	55	systems	system	NOUN
fuelectenerg-900	673	56	(	(	PUNCT
fuelectenerg-900	673	57	mems	mem	NOUN
fuelectenerg-900	673	58	2005	2005	NUM
fuelectenerg-900	673	59	)	)	PUNCT
fuelectenerg-900	673	60	,	,	PUNCT
fuelectenerg-900	673	61	2005	2005	NUM
fuelectenerg-900	673	62	,	,	PUNCT
fuelectenerg-900	673	63	pp	pp	ADJ
fuelectenerg-900	673	64	.	.	PUNCT
fuelectenerg-900	673	65	20	20	NUM
fuelectenerg-900	673	66	-	-	SYM
fuelectenerg-900	673	67	23	23	NUM
fuelectenerg-900	673	68	.	.	PUNCT
fuelectenerg-900	674	1	[	[	X
fuelectenerg-900	674	2	10	10	NUM
fuelectenerg-900	674	3	]	]	PUNCT
fuelectenerg-900	674	4	m.	m.	NOUN
fuelectenerg-900	674	5	rinaldi	rinaldi	PROPN
fuelectenerg-900	674	6	,	,	PUNCT
fuelectenerg-900	674	7	c.	c.	PROPN
fuelectenerg-900	674	8	zuniga	zuniga	PROPN
fuelectenerg-900	674	9	and	and	CCONJ
fuelectenerg-900	674	10	g.	g.	PROPN
fuelectenerg-900	674	11	piazza	piazza	PROPN
fuelectenerg-900	674	12	,	,	PUNCT
fuelectenerg-900	674	13	"	"	PUNCT
fuelectenerg-900	674	14	5	5	NUM
fuelectenerg-900	674	15	-	-	SYM
fuelectenerg-900	674	16	10	10	NUM
fuelectenerg-900	674	17	ghz	ghz	NOUN
fuelectenerg-900	674	18	aln	aln	NOUN
fuelectenerg-900	674	19	contour	contour	NOUN
fuelectenerg-900	674	20	-	-	PUNCT
fuelectenerg-900	674	21	mode	mode	NOUN
fuelectenerg-900	674	22	nanoelectromechanical	nanoelectromechanical	ADJ
fuelectenerg-900	674	23	resonators	resonator	NOUN
fuelectenerg-900	674	24	"	"	PUNCT
fuelectenerg-900	674	25	,	,	PUNCT
fuelectenerg-900	674	26	in	in	ADP
fuelectenerg-900	674	27	proceedings	proceeding	NOUN
fuelectenerg-900	674	28	of	of	ADP
fuelectenerg-900	674	29	the	the	DET
fuelectenerg-900	674	30	22nd	22nd	PROPN
fuelectenerg-900	674	31	ieee	ieee	PROPN
fuelectenerg-900	674	32	international	international	PROPN
fuelectenerg-900	674	33	conference	conference	PROPN
fuelectenerg-900	674	34	on	on	ADP
fuelectenerg-900	674	35	micro	micro	X
fuelectenerg-900	674	36	electro	electro	VERB
fuelectenerg-900	674	37	mechanical	mechanical	ADJ
fuelectenerg-900	674	38	systems	system	NOUN
fuelectenerg-900	674	39	(	(	PUNCT
fuelectenerg-900	674	40	mems	mem	NOUN
fuelectenerg-900	674	41	2009	2009	NUM
fuelectenerg-900	674	42	)	)	PUNCT
fuelectenerg-900	674	43	,	,	PUNCT
fuelectenerg-900	674	44	2009	2009	NUM
fuelectenerg-900	674	45	,	,	PUNCT
fuelectenerg-900	674	46	pp	pp	ADJ
fuelectenerg-900	674	47	.	.	PUNCT
fuelectenerg-900	675	1	916	916	NUM
fuelectenerg-900	675	2	-	-	SYM
fuelectenerg-900	675	3	919	919	NUM
fuelectenerg-900	675	4	.	.	PUNCT
fuelectenerg-900	676	1	[	[	X
fuelectenerg-900	676	2	11	11	NUM
fuelectenerg-900	676	3	]	]	X
fuelectenerg-900	676	4	h.	h.	PROPN
fuelectenerg-900	676	5	m.	m.	PROPN
fuelectenerg-900	676	6	lavasani	lavasani	PROPN
fuelectenerg-900	676	7	,	,	PUNCT
fuelectenerg-900	676	8	p.	p.	NOUN
fuelectenerg-900	676	9	wanling	wanling	NOUN
fuelectenerg-900	676	10	,	,	PUNCT
fuelectenerg-900	676	11	b.	b.	PROPN
fuelectenerg-900	676	12	harrington	harrington	PROPN
fuelectenerg-900	676	13	,	,	PUNCT
fuelectenerg-900	676	14	r.	r.	PROPN
fuelectenerg-900	676	15	abdolvand	abdolvand	PROPN
fuelectenerg-900	676	16	and	and	CCONJ
fuelectenerg-900	676	17	f.	f.	PROPN
fuelectenerg-900	676	18	ayazi	ayazi	PROPN
fuelectenerg-900	676	19	,	,	PUNCT
fuelectenerg-900	676	20	"	"	PUNCT
fuelectenerg-900	676	21	a	a	DET
fuelectenerg-900	676	22	76	76	NUM
fuelectenerg-900	676	23	db	db	PROPN
fuelectenerg-900	676	24	1.7	1.7	NUM
fuelectenerg-900	676	25	ghz	ghz	NOUN
fuelectenerg-900	676	26	0.18	0.18	NUM
fuelectenerg-900	676	27	μm	μm	NOUN
fuelectenerg-900	676	28	cmos	cmos	PROPN
fuelectenerg-900	676	29	tunable	tunable	NOUN
fuelectenerg-900	676	30	tia	tia	PROPN
fuelectenerg-900	676	31	using	use	VERB
fuelectenerg-900	676	32	broadband	broadband	NOUN
fuelectenerg-900	676	33	current	current	ADJ
fuelectenerg-900	676	34	pre	pre	NOUN
fuelectenerg-900	676	35	-	-	NOUN
fuelectenerg-900	676	36	amplifier	amplifier	ADJ
fuelectenerg-900	676	37	for	for	ADP
fuelectenerg-900	676	38	high	high	ADJ
fuelectenerg-900	676	39	frequency	frequency	NOUN
fuelectenerg-900	676	40	lateral	lateral	ADJ
fuelectenerg-900	676	41	micromechanical	micromechanical	ADJ
fuelectenerg-900	676	42	oscillators	oscillator	NOUN
fuelectenerg-900	676	43	"	"	PUNCT
fuelectenerg-900	676	44	,	,	PUNCT
fuelectenerg-900	676	45	ieee	ieee	NOUN
fuelectenerg-900	676	46	journal	journal	NOUN
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fuelectenerg-900	676	48	solid	solid	ADJ
fuelectenerg-900	676	49	-	-	PUNCT
fuelectenerg-900	676	50	state	state	NOUN
fuelectenerg-900	676	51	circuits	circuit	NOUN
fuelectenerg-900	676	52	,	,	PUNCT
fuelectenerg-900	676	53	vol	vol	NOUN
fuelectenerg-900	676	54	.	.	PROPN
fuelectenerg-900	676	55	46	46	NUM
fuelectenerg-900	676	56	,	,	PUNCT
fuelectenerg-900	676	57	pp	pp	ADJ
fuelectenerg-900	676	58	.	.	PUNCT
fuelectenerg-900	677	1	224	224	NUM
fuelectenerg-900	677	2	-	-	SYM
fuelectenerg-900	677	3	235	235	NUM
fuelectenerg-900	677	4	,	,	PUNCT
fuelectenerg-900	677	5	jan	jan	PROPN
fuelectenerg-900	677	6	2011	2011	NUM
fuelectenerg-900	677	7	.	.	PUNCT
fuelectenerg-900	678	1	[	[	X
fuelectenerg-900	678	2	12	12	NUM
fuelectenerg-900	678	3	]	]	PUNCT
fuelectenerg-900	678	4	w.-c	w.-c	NOUN
fuelectenerg-900	678	5	.	.	PUNCT
fuelectenerg-900	679	1	chen	chen	PROPN
fuelectenerg-900	679	2	,	,	PUNCT
fuelectenerg-900	679	3	w.	w.	PROPN
fuelectenerg-900	679	4	fang	fang	PROPN
fuelectenerg-900	679	5	and	and	CCONJ
fuelectenerg-900	679	6	s.-s	s.-	NOUN
fuelectenerg-900	679	7	.	.	PUNCT
fuelectenerg-900	680	1	li	li	PROPN
fuelectenerg-900	680	2	,	,	PUNCT
fuelectenerg-900	680	3	"	"	PUNCT
fuelectenerg-900	680	4	quasi	quasi	ADJ
fuelectenerg-900	680	5	-	-	ADJ
fuelectenerg-900	680	6	linear	linear	ADJ
fuelectenerg-900	680	7	frequency	frequency	NOUN
fuelectenerg-900	680	8	tuning	tuning	NOUN
fuelectenerg-900	680	9	for	for	ADP
fuelectenerg-900	680	10	cmos	cmos	NOUN
fuelectenerg-900	680	11	-	-	PUNCT
fuelectenerg-900	680	12	mems	mems	ADJ
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fuelectenerg-900	680	14	"	"	PUNCT
fuelectenerg-900	680	15	,	,	PUNCT
fuelectenerg-900	680	16	in	in	ADP
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fuelectenerg-900	680	18	of	of	ADP
fuelectenerg-900	680	19	the	the	DET
fuelectenerg-900	680	20	24th	24th	ADJ
fuelectenerg-900	680	21	ieee	ieee	NOUN
fuelectenerg-900	680	22	international	international	ADJ
fuelectenerg-900	680	23	conference	conference	NOUN
fuelectenerg-900	680	24	on	on	ADP
fuelectenerg-900	680	25	micro	micro	X
fuelectenerg-900	680	26	electro	electro	VERB
fuelectenerg-900	680	27	mechanical	mechanical	ADJ
fuelectenerg-900	680	28	systems	system	NOUN
fuelectenerg-900	680	29	(	(	PUNCT
fuelectenerg-900	680	30	mems	mem	NOUN
fuelectenerg-900	680	31	2011	2011	NUM
fuelectenerg-900	680	32	)	)	PUNCT
fuelectenerg-900	680	33	,	,	PUNCT
fuelectenerg-900	680	34	2011	2011	NUM
fuelectenerg-900	680	35	,	,	PUNCT
fuelectenerg-900	680	36	pp	pp	ADJ
fuelectenerg-900	680	37	.	.	PUNCT
fuelectenerg-900	681	1	784	784	NUM
fuelectenerg-900	681	2	-	-	SYM
fuelectenerg-900	681	3	787	787	NUM
fuelectenerg-900	681	4	.	.	PUNCT
fuelectenerg-900	682	1	[	[	X
fuelectenerg-900	682	2	13	13	NUM
fuelectenerg-900	682	3	]	]	PUNCT
fuelectenerg-900	682	4	g.	g.	PROPN
fuelectenerg-900	682	5	k.	k.	PROPN
fuelectenerg-900	682	6	ho	ho	PROPN
fuelectenerg-900	682	7	,	,	PUNCT
fuelectenerg-900	682	8	k.	k.	PROPN
fuelectenerg-900	682	9	sundaresan	sundaresan	PROPN
fuelectenerg-900	682	10	,	,	PUNCT
fuelectenerg-900	682	11	s.	s.	PROPN
fuelectenerg-900	682	12	pourkamali	pourkamali	PROPN
fuelectenerg-900	682	13	and	and	CCONJ
fuelectenerg-900	682	14	f.	f.	PROPN
fuelectenerg-900	682	15	ayazi	ayazi	PROPN
fuelectenerg-900	682	16	,	,	PUNCT
fuelectenerg-900	682	17	"	"	PUNCT
fuelectenerg-900	682	18	low	low	ADJ
fuelectenerg-900	682	19	-	-	PUNCT
fuelectenerg-900	682	20	motional	motional	ADJ
fuelectenerg-900	682	21	-	-	PUNCT
fuelectenerg-900	682	22	impedance	impedance	NOUN
fuelectenerg-900	682	23	highly	highly	ADV
fuelectenerg-900	682	24	-	-	PUNCT
fuelectenerg-900	682	25	tunable	tunable	NOUN
fuelectenerg-900	682	26	i2	i2	NOUN
fuelectenerg-900	682	27	resonators	resonator	NOUN
fuelectenerg-900	682	28	for	for	ADP
fuelectenerg-900	682	29	temperature	temperature	NOUN
fuelectenerg-900	682	30	compensated	compensate	VERB
fuelectenerg-900	682	31	reference	reference	NOUN
fuelectenerg-900	682	32	oscillators	oscillator	NOUN
fuelectenerg-900	682	33	"	"	PUNCT
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fuelectenerg-900	682	35	in	in	ADP
fuelectenerg-900	682	36	proceedings	proceeding	NOUN
fuelectenerg-900	682	37	of	of	ADP
fuelectenerg-900	682	38	the	the	DET
fuelectenerg-900	682	39	ieee	ieee	PROPN
fuelectenerg-900	682	40	micro	micro	PROPN
fuelectenerg-900	682	41	electro	electro	VERB
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fuelectenerg-900	682	43	systems	system	NOUN
fuelectenerg-900	682	44	conference	conference	NOUN
fuelectenerg-900	682	45	(	(	PUNCT
fuelectenerg-900	682	46	mems‘05	mems‘05	NOUN
fuelectenerg-900	682	47	)	)	PUNCT
fuelectenerg-900	682	48	,	,	PUNCT
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fuelectenerg-900	682	50	,	,	PUNCT
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fuelectenerg-900	682	52	,	,	PUNCT
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fuelectenerg-900	682	54	,	,	PUNCT
fuelectenerg-900	682	55	pp	pp	ADJ
fuelectenerg-900	682	56	.	.	PUNCT
fuelectenerg-900	683	1	116	116	NUM
fuelectenerg-900	683	2	-	-	SYM
fuelectenerg-900	683	3	120	120	NUM
fuelectenerg-900	683	4	.	.	PUNCT
fuelectenerg-900	684	1	[	[	X
fuelectenerg-900	684	2	14	14	NUM
fuelectenerg-900	684	3	]	]	X
fuelectenerg-900	684	4	h.	h.	PROPN
fuelectenerg-900	684	5	g.	g.	PROPN
fuelectenerg-900	684	6	barrow	barrow	PROPN
fuelectenerg-900	684	7	,	,	PUNCT
fuelectenerg-900	684	8	t.	t.	PROPN
fuelectenerg-900	684	9	l.	l.	PROPN
fuelectenerg-900	684	10	naing	naing	PROPN
fuelectenerg-900	684	11	,	,	PUNCT
fuelectenerg-900	684	12	r.	r.	PROPN
fuelectenerg-900	684	13	a.	a.	PROPN
fuelectenerg-900	684	14	schneider	schneider	PROPN
fuelectenerg-900	684	15	,	,	PUNCT
fuelectenerg-900	684	16	t.	t.	PROPN
fuelectenerg-900	684	17	o.	o.	PROPN
fuelectenerg-900	684	18	rocheleau	rocheleau	PROPN
fuelectenerg-900	684	19	,	,	PUNCT
fuelectenerg-900	684	20	v.	v.	PROPN
fuelectenerg-900	684	21	yeh	yeh	PROPN
fuelectenerg-900	684	22	,	,	PUNCT
fuelectenerg-900	684	23	z.	z.	PROPN
fuelectenerg-900	684	24	ren	ren	PROPN
fuelectenerg-900	684	25	and	and	CCONJ
fuelectenerg-900	684	26	c.	c.	PROPN
fuelectenerg-900	684	27	t.-c	t.-c	PROPN
fuelectenerg-900	684	28	.	.	PUNCT
fuelectenerg-900	685	1	nguyen	nguyen	PROPN
fuelectenerg-900	685	2	,	,	PUNCT
fuelectenerg-900	685	3	"	"	PUNCT
fuelectenerg-900	685	4	a	a	DET
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fuelectenerg-900	685	6	-	-	PUNCT
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fuelectenerg-900	685	9	-	-	PUNCT
fuelectenerg-900	685	10	khz	khz	NOUN
fuelectenerg-900	685	11	clock	clock	NOUN
fuelectenerg-900	685	12	oscillator	oscillator	NOUN
fuelectenerg-900	685	13	using	use	VERB
fuelectenerg-900	685	14	a	a	DET
fuelectenerg-900	685	15	0.0154	0.0154	NUM
fuelectenerg-900	685	16	-	-	PUNCT
fuelectenerg-900	685	17	mm2	mm2	NOUN
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fuelectenerg-900	685	19	resonator	resonator	NOUN
fuelectenerg-900	685	20	frequencysetting	frequencysette	VERB
fuelectenerg-900	685	21	element	element	NOUN
fuelectenerg-900	685	22	"	"	PUNCT
fuelectenerg-900	685	23	,	,	PUNCT
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fuelectenerg-900	685	30	freq	freq	NOUN
fuelectenerg-900	685	31	.	.	PUNCT
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fuelectenerg-900	686	3	,	,	PUNCT
fuelectenerg-900	686	4	baltimore	baltimore	PROPN
fuelectenerg-900	686	5	,	,	PUNCT
fuelectenerg-900	686	6	md	md	PROPN
fuelectenerg-900	686	7	,	,	PUNCT
fuelectenerg-900	686	8	2012	2012	NUM
fuelectenerg-900	686	9	,	,	PUNCT
fuelectenerg-900	686	10	pp	pp	ADJ
fuelectenerg-900	686	11	.	.	PUNCT
fuelectenerg-900	687	1	1	1	NUM
fuelectenerg-900	687	2	-	-	SYM
fuelectenerg-900	687	3	6	6	NUM
fuelectenerg-900	687	4	.	.	PUNCT
fuelectenerg-900	688	1	[	[	X
fuelectenerg-900	688	2	15	15	NUM
fuelectenerg-900	688	3	]	]	PUNCT
fuelectenerg-900	688	4	z.	z.	PROPN
fuelectenerg-900	688	5	hao	hao	PROPN
fuelectenerg-900	688	6	,	,	PUNCT
fuelectenerg-900	688	7	s.	s.	PROPN
fuelectenerg-900	688	8	pourkamali	pourkamali	PROPN
fuelectenerg-900	688	9	and	and	CCONJ
fuelectenerg-900	688	10	f.	f.	PROPN
fuelectenerg-900	688	11	ayazi	ayazi	PROPN
fuelectenerg-900	688	12	,	,	PUNCT
fuelectenerg-900	688	13	"	"	PUNCT
fuelectenerg-900	688	14	vhf	vhf	PROPN
fuelectenerg-900	688	15	single	single	ADJ
fuelectenerg-900	688	16	-	-	PUNCT
fuelectenerg-900	688	17	crystal	crystal	NOUN
fuelectenerg-900	688	18	silicon	silicon	NOUN
fuelectenerg-900	688	19	elliptic	elliptic	ADJ
fuelectenerg-900	688	20	bulk	bulk	ADJ
fuelectenerg-900	688	21	-	-	PUNCT
fuelectenerg-900	688	22	mode	mode	NOUN
fuelectenerg-900	688	23	capacitive	capacitive	ADJ
fuelectenerg-900	688	24	disk	disk	NOUN
fuelectenerg-900	688	25	resonators	resonator	NOUN
fuelectenerg-900	688	26	–	–	PUNCT
fuelectenerg-900	688	27	part	part	NOUN
fuelectenerg-900	688	28	i	i	NOUN
fuelectenerg-900	688	29	:	:	PUNCT
fuelectenerg-900	688	30	design	design	NOUN
fuelectenerg-900	688	31	and	and	CCONJ
fuelectenerg-900	688	32	modeling	modeling	NOUN
fuelectenerg-900	688	33	"	"	PUNCT
fuelectenerg-900	688	34	,	,	PUNCT
fuelectenerg-900	688	35	j.	j.	PROPN
fuelectenerg-900	688	36	microelectromech	microelectromech	PROPN
fuelectenerg-900	688	37	.	.	PUNCT
fuelectenerg-900	689	1	syst	syst	PROPN
fuelectenerg-900	689	2	.	.	PUNCT
fuelectenerg-900	689	3	,	,	PUNCT
fuelectenerg-900	689	4	vol	vol	NOUN
fuelectenerg-900	689	5	.	.	PROPN
fuelectenerg-900	689	6	13	13	NUM
fuelectenerg-900	689	7	,	,	PUNCT
fuelectenerg-900	689	8	pp	pp	ADJ
fuelectenerg-900	689	9	.	.	PUNCT
fuelectenerg-900	690	1	1043–1053	1043–1053	NUM
fuelectenerg-900	690	2	,	,	PUNCT
fuelectenerg-900	690	3	2004	2004	NUM
fuelectenerg-900	690	4	.	.	PUNCT
fuelectenerg-900	691	1	[	[	X
fuelectenerg-900	691	2	16	16	NUM
fuelectenerg-900	691	3	]	]	PUNCT
fuelectenerg-900	691	4	j.	j.	PROPN
fuelectenerg-900	691	5	e.	e.	PROPN
fuelectenerg-900	691	6	y.	y.	PROPN
fuelectenerg-900	691	7	lee	lee	PROPN
fuelectenerg-900	691	8	and	and	CCONJ
fuelectenerg-900	691	9	a.	a.	NOUN
fuelectenerg-900	691	10	a.	a.	NOUN
fuelectenerg-900	691	11	seshia	seshia	PROPN
fuelectenerg-900	691	12	,	,	PUNCT
fuelectenerg-900	691	13	"	"	PUNCT
fuelectenerg-900	691	14	5.4	5.4	NUM
fuelectenerg-900	691	15	-	-	PUNCT
fuelectenerg-900	691	16	mhz	mhz	NOUN
fuelectenerg-900	691	17	single	single	ADJ
fuelectenerg-900	691	18	-	-	PUNCT
fuelectenerg-900	691	19	crystal	crystal	NOUN
fuelectenerg-900	691	20	silicon	silicon	NOUN
fuelectenerg-900	691	21	wine	wine	NOUN
fuelectenerg-900	691	22	glass	glass	NOUN
fuelectenerg-900	691	23	mode	mode	NOUN
fuelectenerg-900	691	24	disk	disk	NOUN
fuelectenerg-900	691	25	resonator	resonator	NOUN
fuelectenerg-900	691	26	with	with	ADP
fuelectenerg-900	691	27	quality	quality	NOUN
fuelectenerg-900	691	28	factor	factor	NOUN
fuelectenerg-900	691	29	of	of	ADP
fuelectenerg-900	691	30	2	2	NUM
fuelectenerg-900	691	31	million	million	NUM
fuelectenerg-900	691	32	"	"	PUNCT
fuelectenerg-900	691	33	,	,	PUNCT
fuelectenerg-900	691	34	sens	sen	NOUN
fuelectenerg-900	691	35	.	.	PROPN
fuelectenerg-900	691	36	actuators	actuator	NOUN
fuelectenerg-900	691	37	a	a	DET
fuelectenerg-900	691	38	,	,	PUNCT
fuelectenerg-900	691	39	vol	vol	NOUN
fuelectenerg-900	691	40	.	.	PROPN
fuelectenerg-900	691	41	156	156	NUM
fuelectenerg-900	691	42	,	,	PUNCT
fuelectenerg-900	691	43	pp	pp	ADJ
fuelectenerg-900	691	44	.	.	PUNCT
fuelectenerg-900	692	1	28–35	28–35	NUM
fuelectenerg-900	692	2	,	,	PUNCT
fuelectenerg-900	692	3	2009	2009	NUM
fuelectenerg-900	692	4	.	.	PUNCT
fuelectenerg-900	693	1	[	[	X
fuelectenerg-900	693	2	17	17	NUM
fuelectenerg-900	693	3	]	]	PUNCT
fuelectenerg-900	693	4	j.	j.	PROPN
fuelectenerg-900	693	5	wang	wang	PROPN
fuelectenerg-900	693	6	,	,	PUNCT
fuelectenerg-900	693	7	j.	j.	PROPN
fuelectenerg-900	693	8	e.	e.	PROPN
fuelectenerg-900	693	9	butler	butler	PROPN
fuelectenerg-900	693	10	,	,	PUNCT
fuelectenerg-900	693	11	t.	t.	PROPN
fuelectenerg-900	693	12	feygelson	feygelson	PROPN
fuelectenerg-900	693	13	and	and	CCONJ
fuelectenerg-900	693	14	c.	c.	PROPN
fuelectenerg-900	693	15	t.-c	t.-c	PROPN
fuelectenerg-900	693	16	.	.	PUNCT
fuelectenerg-900	694	1	nguyen	nguyen	NOUN
fuelectenerg-900	694	2	,	,	PUNCT
fuelectenerg-900	694	3	"	"	PUNCT
fuelectenerg-900	694	4	1.51	1.51	NUM
fuelectenerg-900	694	5	-	-	PUNCT
fuelectenerg-900	694	6	ghz	ghz	NOUN
fuelectenerg-900	694	7	polydiamond	polydiamond	NOUN
fuelectenerg-900	694	8	micromechanical	micromechanical	ADJ
fuelectenerg-900	694	9	disk	disk	NOUN
fuelectenerg-900	694	10	resonator	resonator	NOUN
fuelectenerg-900	694	11	with	with	ADP
fuelectenerg-900	694	12	impedance	impedance	NOUN
fuelectenerg-900	694	13	-	-	PUNCT
fuelectenerg-900	694	14	mismatched	mismatch	VERB
fuelectenerg-900	694	15	isolating	isolating	NOUN
fuelectenerg-900	694	16	support	support	NOUN
fuelectenerg-900	694	17	"	"	PUNCT
fuelectenerg-900	694	18	,	,	PUNCT
fuelectenerg-900	694	19	in	in	ADP
fuelectenerg-900	694	20	proceedings	proceeding	NOUN
fuelectenerg-900	694	21	of	of	ADP
fuelectenerg-900	694	22	the	the	DET
fuelectenerg-900	694	23	17th	17th	ADJ
fuelectenerg-900	694	24	ieee	ieee	NOUN
fuelectenerg-900	694	25	international	international	ADJ
fuelectenerg-900	694	26	conference	conference	NOUN
fuelectenerg-900	694	27	on	on	ADP
fuelectenerg-900	694	28	micro	micro	X
fuelectenerg-900	694	29	electro	electro	VERB
fuelectenerg-900	694	30	mechanical	mechanical	ADJ
fuelectenerg-900	694	31	systems	system	NOUN
fuelectenerg-900	694	32	,	,	PUNCT
fuelectenerg-900	694	33	maastricht	maastricht	PROPN
fuelectenerg-900	694	34	,	,	PUNCT
fuelectenerg-900	694	35	the	the	DET
fuelectenerg-900	694	36	netherlands	netherlands	PROPN
fuelectenerg-900	694	37	,	,	PUNCT
fuelectenerg-900	694	38	2004	2004	NUM
fuelectenerg-900	694	39	,	,	PUNCT
fuelectenerg-900	694	40	pp	pp	PROPN
fuelectenerg-900	694	41	.	.	PUNCT
fuelectenerg-900	695	1	641	641	NUM
fuelectenerg-900	695	2	-	-	SYM
fuelectenerg-900	695	3	644	644	NUM
fuelectenerg-900	695	4	.	.	PUNCT
fuelectenerg-900	696	1	[	[	X
fuelectenerg-900	696	2	18	18	NUM
fuelectenerg-900	696	3	]	]	X
fuelectenerg-900	696	4	frederic	frederic	PROPN
fuelectenerg-900	696	5	nabki	nabki	PROPN
fuelectenerg-900	696	6	,	,	PUNCT
fuelectenerg-900	696	7	"	"	PUNCT
fuelectenerg-900	696	8	silicon	silicon	PROPN
fuelectenerg-900	696	9	carbide	carbide	PROPN
fuelectenerg-900	696	10	micro	micro	NOUN
fuelectenerg-900	696	11	-	-	ADJ
fuelectenerg-900	696	12	electromechanical	electromechanical	ADJ
fuelectenerg-900	696	13	resonators	resonator	NOUN
fuelectenerg-900	696	14	for	for	ADP
fuelectenerg-900	696	15	highly	highly	ADV
fuelectenerg-900	696	16	integrated	integrate	VERB
fuelectenerg-900	696	17	frequency	frequency	NOUN
fuelectenerg-900	696	18	synthesizers	synthesizer	NOUN
fuelectenerg-900	696	19	"	"	PUNCT
fuelectenerg-900	696	20	,	,	PUNCT
fuelectenerg-900	696	21	phd	phd	NOUN
fuelectenerg-900	696	22	thesis	thesis	NOUN
fuelectenerg-900	696	23	,	,	PUNCT
fuelectenerg-900	696	24	mcgill	mcgill	PROPN
fuelectenerg-900	696	25	university	university	PROPN
fuelectenerg-900	696	26	,	,	PUNCT
fuelectenerg-900	696	27	montreal	montreal	PROPN
fuelectenerg-900	696	28	,	,	PUNCT
fuelectenerg-900	696	29	canada	canada	PROPN
fuelectenerg-900	696	30	,	,	PUNCT
fuelectenerg-900	696	31	2009	2009	NUM
fuelectenerg-900	696	32	.	.	PUNCT
fuelectenerg-900	697	1	[	[	X
fuelectenerg-900	697	2	19	19	NUM
fuelectenerg-900	697	3	]	]	PUNCT
fuelectenerg-900	697	4	k.	k.	PROPN
fuelectenerg-900	697	5	wang	wang	PROPN
fuelectenerg-900	697	6	,	,	PUNCT
fuelectenerg-900	697	7	a.-c	a.-c	PROPN
fuelectenerg-900	697	8	.	.	PUNCT
fuelectenerg-900	698	1	wong	wong	PROPN
fuelectenerg-900	698	2	and	and	CCONJ
fuelectenerg-900	698	3	c.	c.	PROPN
fuelectenerg-900	698	4	t.-c	t.-c	PROPN
fuelectenerg-900	698	5	.	.	PUNCT
fuelectenerg-900	699	1	nguyen	nguyen	PROPN
fuelectenerg-900	699	2	,	,	PUNCT
fuelectenerg-900	699	3	"	"	PUNCT
fuelectenerg-900	699	4	vhf	vhf	PROPN
fuelectenerg-900	699	5	free	free	ADJ
fuelectenerg-900	699	6	–	–	PUNCT
fuelectenerg-900	699	7	free	free	ADJ
fuelectenerg-900	699	8	beam	beam	NOUN
fuelectenerg-900	699	9	high	high	ADJ
fuelectenerg-900	699	10	-	-	PUNCT
fuelectenerg-900	699	11	q	q	NOUN
fuelectenerg-900	699	12	micromechanical	micromechanical	ADJ
fuelectenerg-900	699	13	resonators	resonator	NOUN
fuelectenerg-900	699	14	"	"	PUNCT
fuelectenerg-900	699	15	,	,	PUNCT
fuelectenerg-900	699	16	ieee	ieee	PROPN
fuelectenerg-900	699	17	/	/	SYM
fuelectenerg-900	699	18	asme	asme	PROPN
fuelectenerg-900	699	19	j.	j.	PROPN
fuelectenerg-900	699	20	microelectromech	microelectromech	PROPN
fuelectenerg-900	699	21	.	.	PUNCT
fuelectenerg-900	700	1	syst	syst	PROPN
fuelectenerg-900	700	2	.	.	PUNCT
fuelectenerg-900	700	3	,	,	PUNCT
fuelectenerg-900	700	4	vol	vol	NOUN
fuelectenerg-900	700	5	.	.	PROPN
fuelectenerg-900	700	6	9	9	NUM
fuelectenerg-900	700	7	,	,	PUNCT
fuelectenerg-900	700	8	pp	pp	ADJ
fuelectenerg-900	700	9	.	.	PUNCT
fuelectenerg-900	701	1	347	347	NUM
fuelectenerg-900	701	2	-	-	SYM
fuelectenerg-900	701	3	360	360	NUM
fuelectenerg-900	701	4	,	,	PUNCT
fuelectenerg-900	701	5	2000	2000	NUM
fuelectenerg-900	701	6	.	.	PUNCT
fuelectenerg-900	702	1	[	[	X
fuelectenerg-900	702	2	20	20	NUM
fuelectenerg-900	702	3	]	]	X
fuelectenerg-900	702	4	s.	s.	PROPN
fuelectenerg-900	702	5	pourkamali	pourkamali	PROPN
fuelectenerg-900	702	6	and	and	CCONJ
fuelectenerg-900	702	7	f.	f.	PROPN
fuelectenerg-900	702	8	ayazi	ayazi	PROPN
fuelectenerg-900	702	9	,	,	PUNCT
fuelectenerg-900	702	10	"	"	PUNCT
fuelectenerg-900	702	11	soi	soi	NOUN
fuelectenerg-900	702	12	-	-	PUNCT
fuelectenerg-900	702	13	based	base	VERB
fuelectenerg-900	702	14	hf	hf	NOUN
fuelectenerg-900	702	15	and	and	CCONJ
fuelectenerg-900	702	16	vhf	vhf	PROPN
fuelectenerg-900	702	17	single	single	ADJ
fuelectenerg-900	702	18	-	-	PUNCT
fuelectenerg-900	702	19	crystal	crystal	NOUN
fuelectenerg-900	702	20	silicon	silicon	NOUN
fuelectenerg-900	702	21	resonators	resonator	NOUN
fuelectenerg-900	702	22	with	with	ADP
fuelectenerg-900	702	23	sub-100	sub-100	ADJ
fuelectenerg-900	702	24	nanometer	nanometer	NOUN
fuelectenerg-900	702	25	vertical	vertical	ADJ
fuelectenerg-900	702	26	capacitive	capacitive	ADJ
fuelectenerg-900	702	27	gaps	gap	NOUN
fuelectenerg-900	702	28	"	"	PUNCT
fuelectenerg-900	702	29	,	,	PUNCT
fuelectenerg-900	702	30	in	in	ADP
fuelectenerg-900	702	31	proceedings	proceeding	NOUN
fuelectenerg-900	702	32	of	of	ADP
fuelectenerg-900	702	33	the	the	DET
fuelectenerg-900	702	34	12th	12th	ADJ
fuelectenerg-900	702	35	international	international	ADJ
fuelectenerg-900	702	36	conference	conference	NOUN
fuelectenerg-900	702	37	on	on	ADP
fuelectenerg-900	702	38	solid	solid	ADJ
fuelectenerg-900	702	39	state	state	NOUN
fuelectenerg-900	702	40	sensors	sensor	NOUN
fuelectenerg-900	702	41	,	,	PUNCT
fuelectenerg-900	702	42	actuators	actuator	NOUN
fuelectenerg-900	702	43	and	and	CCONJ
fuelectenerg-900	702	44	microsystems	microsystem	NOUN
fuelectenerg-900	702	45	(	(	PUNCT
fuelectenerg-900	702	46	transducers	transducer	NOUN
fuelectenerg-900	702	47	‘	'	PUNCT
fuelectenerg-900	702	48	03	03	NUM
fuelectenerg-900	702	49	)	)	PUNCT
fuelectenerg-900	702	50	,	,	PUNCT
fuelectenerg-900	702	51	boston	boston	PROPN
fuelectenerg-900	702	52	,	,	PUNCT
fuelectenerg-900	702	53	2003	2003	NUM
fuelectenerg-900	702	54	,	,	PUNCT
fuelectenerg-900	702	55	pp	pp	ADP
fuelectenerg-900	702	56	.	.	PUNCT
fuelectenerg-900	702	57	837	837	NUM
fuelectenerg-900	702	58	-	-	SYM
fuelectenerg-900	702	59	840	840	NUM
fuelectenerg-900	702	60	.	.	PUNCT
fuelectenerg-900	703	1	[	[	X
fuelectenerg-900	703	2	21	21	NUM
fuelectenerg-900	703	3	]	]	X
fuelectenerg-900	703	4	y.	y.	PROPN
fuelectenerg-900	703	5	naito	naito	PROPN
fuelectenerg-900	703	6	,	,	PUNCT
fuelectenerg-900	703	7	p.	p.	PROPN
fuelectenerg-900	703	8	helin	helin	PROPN
fuelectenerg-900	703	9	,	,	PUNCT
fuelectenerg-900	703	10	k.	k.	PROPN
fuelectenerg-900	703	11	nakamura	nakamura	PROPN
fuelectenerg-900	703	12	,	,	PUNCT
fuelectenerg-900	703	13	j.	j.	PROPN
fuelectenerg-900	703	14	de	de	PROPN
fuelectenerg-900	703	15	coster	coster	PROPN
fuelectenerg-900	703	16	,	,	PUNCT
fuelectenerg-900	703	17	b.	b.	PROPN
fuelectenerg-900	703	18	guo	guo	PROPN
fuelectenerg-900	703	19	,	,	PUNCT
fuelectenerg-900	703	20	l.	l.	PROPN
fuelectenerg-900	703	21	haspeslagh	haspeslagh	PROPN
fuelectenerg-900	703	22	,	,	PUNCT
fuelectenerg-900	703	23	k.	k.	PROPN
fuelectenerg-900	703	24	onishi	onishi	PROPN
fuelectenerg-900	703	25	and	and	CCONJ
fuelectenerg-900	703	26	h.	h.	PROPN
fuelectenerg-900	703	27	tilmans	tilmans	PROPN
fuelectenerg-900	703	28	,	,	PUNCT
fuelectenerg-900	703	29	"	"	PUNCT
fuelectenerg-900	703	30	high	high	ADJ
fuelectenerg-900	703	31	-	-	PUNCT
fuelectenerg-900	703	32	q	q	NOUN
fuelectenerg-900	703	33	torsional	torsional	ADJ
fuelectenerg-900	703	34	mode	mode	NOUN
fuelectenerg-900	703	35	si	si	NOUN
fuelectenerg-900	703	36	triangular	triangular	NOUN
fuelectenerg-900	703	37	beam	beam	NOUN
fuelectenerg-900	703	38	resonators	resonator	NOUN
fuelectenerg-900	703	39	encapsulated	encapsulate	VERB
fuelectenerg-900	703	40	using	use	VERB
fuelectenerg-900	703	41	sige	sige	ADJ
fuelectenerg-900	703	42	thin	thin	ADJ
fuelectenerg-900	703	43	film	film	NOUN
fuelectenerg-900	703	44	"	"	PUNCT
fuelectenerg-900	703	45	,	,	PUNCT
fuelectenerg-900	703	46	in	in	ADP
fuelectenerg-900	703	47	proceedings	proceeding	NOUN
fuelectenerg-900	703	48	of	of	ADP
fuelectenerg-900	703	49	the	the	DET
fuelectenerg-900	703	50	ieee	ieee	NOUN
fuelectenerg-900	703	51	international	international	PROPN
fuelectenerg-900	703	52	electron	electron	NOUN
fuelectenerg-900	703	53	devices	device	NOUN
fuelectenerg-900	703	54	meeting	meeting	NOUN
fuelectenerg-900	703	55	,	,	PUNCT
fuelectenerg-900	703	56	san	san	PROPN
fuelectenerg-900	703	57	francisco	francisco	PROPN
fuelectenerg-900	703	58	,	,	PUNCT
fuelectenerg-900	703	59	2010	2010	NUM
fuelectenerg-900	703	60	,	,	PUNCT
fuelectenerg-900	703	61	pp	pp	ADP
fuelectenerg-900	703	62	.	.	PUNCT
fuelectenerg-900	704	1	154–157	154–157	NUM
fuelectenerg-900	704	2	.	.	PUNCT
fuelectenerg-900	705	1	[	[	X
fuelectenerg-900	705	2	22	22	NUM
fuelectenerg-900	705	3	]	]	PUNCT
fuelectenerg-900	705	4	t.	t.	PROPN
fuelectenerg-900	705	5	j.	j.	PROPN
fuelectenerg-900	705	6	cheng	cheng	PROPN
fuelectenerg-900	705	7	and	and	CCONJ
fuelectenerg-900	705	8	s.	s.	PROPN
fuelectenerg-900	705	9	a.	a.	PROPN
fuelectenerg-900	705	10	bhave	bhave	PROPN
fuelectenerg-900	705	11	.	.	PUNCT
fuelectenerg-900	706	1	"	"	PUNCT
fuelectenerg-900	706	2	high	high	ADJ
fuelectenerg-900	706	3	-	-	PUNCT
fuelectenerg-900	706	4	q	q	NOUN
fuelectenerg-900	706	5	,	,	PUNCT
fuelectenerg-900	706	6	low	low	ADJ
fuelectenerg-900	706	7	impendance	impendance	NOUN
fuelectenerg-900	706	8	polysilicon	polysilicon	NOUN
fuelectenerg-900	706	9	resonators	resonator	NOUN
fuelectenerg-900	706	10	with	with	ADP
fuelectenerg-900	706	11	10	10	NUM
fuelectenerg-900	706	12	nm	nm	ADJ
fuelectenerg-900	706	13	air	air	NOUN
fuelectenerg-900	706	14	gaps	gap	NOUN
fuelectenerg-900	706	15	"	"	PUNCT
fuelectenerg-900	706	16	,	,	PUNCT
fuelectenerg-900	706	17	in	in	ADP
fuelectenerg-900	706	18	proceedings	proceeding	NOUN
fuelectenerg-900	706	19	of	of	ADP
fuelectenerg-900	706	20	the	the	DET
fuelectenerg-900	706	21	23rd	23rd	ADJ
fuelectenerg-900	706	22	ieee	ieee	NOUN
fuelectenerg-900	706	23	international	international	ADJ
fuelectenerg-900	706	24	conference	conference	NOUN
fuelectenerg-900	706	25	on	on	ADP
fuelectenerg-900	706	26	micro	micro	X
fuelectenerg-900	706	27	electro	electro	VERB
fuelectenerg-900	706	28	mechanical	mechanical	ADJ
fuelectenerg-900	706	29	systems	system	NOUN
fuelectenerg-900	706	30	(	(	PUNCT
fuelectenerg-900	706	31	mems	mems	PROPN
fuelectenerg-900	706	32	2010	2010	NUM
fuelectenerg-900	706	33	)	)	PUNCT
fuelectenerg-900	706	34	,	,	PUNCT
fuelectenerg-900	706	35	wanchai	wanchai	PROPN
fuelectenerg-900	706	36	,	,	PUNCT
fuelectenerg-900	706	37	hong	hong	PROPN
fuelectenerg-900	706	38	kong	kong	PROPN
fuelectenerg-900	706	39	,	,	PUNCT
fuelectenerg-900	706	40	2010	2010	NUM
fuelectenerg-900	706	41	,	,	PUNCT
fuelectenerg-900	706	42	pp	pp	ADJ
fuelectenerg-900	706	43	.	.	PUNCT
fuelectenerg-900	707	1	695	695	NUM
fuelectenerg-900	707	2	-	-	NUM
fuelectenerg-900	707	3	698	698	NUM
fuelectenerg-900	707	4	.	.	PUNCT
fuelectenerg-900	708	1	rf	rf	VERB
fuelectenerg-900	708	2	mems	mem	NOUN
fuelectenerg-900	708	3	/	/	SYM
fuelectenerg-900	708	4	nems	nem	NOUN
fuelectenerg-900	708	5	resonators	resonator	NOUN
fuelectenerg-900	708	6	for	for	ADP
fuelectenerg-900	708	7	wireless	wireless	ADJ
fuelectenerg-900	708	8	communication	communication	NOUN
fuelectenerg-900	708	9	systems	system	NOUN
fuelectenerg-900	708	10	and	and	CCONJ
fuelectenerg-900	708	11	adsorption	adsorption	NOUN
fuelectenerg-900	708	12	-	-	PUNCT
fuelectenerg-900	708	13	desorption	desorption	NOUN
fuelectenerg-900	708	14	phase	phase	NOUN
fuelectenerg-900	708	15	noise	noise	NOUN
fuelectenerg-900	708	16	377	377	NUM
fuelectenerg-900	709	1	[	[	X
fuelectenerg-900	709	2	23	23	NUM
fuelectenerg-900	709	3	]	]	X
fuelectenerg-900	709	4	v.	v.	ADP
fuelectenerg-900	709	5	kaajakari	kaajakari	PROPN
fuelectenerg-900	709	6	,	,	PUNCT
fuelectenerg-900	709	7	t.	t.	PROPN
fuelectenerg-900	709	8	mattila	mattila	NOUN
fuelectenerg-900	709	9	,	,	PUNCT
fuelectenerg-900	709	10	a.	a.	NOUN
fuelectenerg-900	709	11	oja	oja	PROPN
fuelectenerg-900	709	12	,	,	PUNCT
fuelectenerg-900	709	13	j.	j.	PROPN
fuelectenerg-900	709	14	kiihamäki	kiihamäki	PROPN
fuelectenerg-900	709	15	and	and	CCONJ
fuelectenerg-900	709	16	h.	h.	PROPN
fuelectenerg-900	709	17	seppä	seppä	PROPN
fuelectenerg-900	709	18	,	,	PUNCT
fuelectenerg-900	709	19	"	"	PUNCT
fuelectenerg-900	709	20	square	square	ADJ
fuelectenerg-900	709	21	-	-	PUNCT
fuelectenerg-900	709	22	extensional	extensional	ADJ
fuelectenerg-900	709	23	mode	mode	NOUN
fuelectenerg-900	709	24	single	single	ADJ
fuelectenerg-900	709	25	-	-	PUNCT
fuelectenerg-900	709	26	crystal	crystal	NOUN
fuelectenerg-900	709	27	silicon	silicon	NOUN
fuelectenerg-900	709	28	micromechanical	micromechanical	ADJ
fuelectenerg-900	709	29	resonator	resonator	NOUN
fuelectenerg-900	709	30	for	for	ADP
fuelectenerg-900	709	31	low	low	ADJ
fuelectenerg-900	709	32	-	-	PUNCT
fuelectenerg-900	709	33	phase	phase	NOUN
fuelectenerg-900	709	34	-	-	PUNCT
fuelectenerg-900	709	35	noise	noise	NOUN
fuelectenerg-900	709	36	oscillator	oscillator	NOUN
fuelectenerg-900	709	37	applications	application	NOUN
fuelectenerg-900	709	38	"	"	PUNCT
fuelectenerg-900	709	39	,	,	PUNCT
fuelectenerg-900	709	40	ieee	ieee	NOUN
fuelectenerg-900	709	41	electron	electron	NOUN
fuelectenerg-900	709	42	device	device	NOUN
fuelectenerg-900	709	43	lett	lett	PROPN
fuelectenerg-900	709	44	.	.	PUNCT
fuelectenerg-900	709	45	,	,	PUNCT
fuelectenerg-900	709	46	vol	vol	NOUN
fuelectenerg-900	709	47	.	.	PROPN
fuelectenerg-900	709	48	25	25	NUM
fuelectenerg-900	709	49	,	,	PUNCT
fuelectenerg-900	709	50	pp	pp	ADJ
fuelectenerg-900	709	51	.	.	PUNCT
fuelectenerg-900	710	1	173–175	173–175	NUM
fuelectenerg-900	710	2	,	,	PUNCT
fuelectenerg-900	710	3	2004	2004	NUM
fuelectenerg-900	710	4	.	.	PUNCT
fuelectenerg-900	711	1	[	[	X
fuelectenerg-900	711	2	24	24	NUM
fuelectenerg-900	711	3	]	]	X
fuelectenerg-900	711	4	g.	g.	PROPN
fuelectenerg-900	711	5	wu	wu	PROPN
fuelectenerg-900	711	6	,	,	PUNCT
fuelectenerg-900	711	7	d.	d.	PROPN
fuelectenerg-900	711	8	xu	xu	PROPN
fuelectenerg-900	711	9	,	,	PUNCT
fuelectenerg-900	711	10	b.	b.	PROPN
fuelectenerg-900	711	11	xiong	xiong	PROPN
fuelectenerg-900	711	12	and	and	CCONJ
fuelectenerg-900	711	13	y.	y.	PROPN
fuelectenerg-900	711	14	wang	wang	PROPN
fuelectenerg-900	711	15	,	,	PUNCT
fuelectenerg-900	711	16	"	"	PUNCT
fuelectenerg-900	711	17	a	a	DET
fuelectenerg-900	711	18	high	high	ADJ
fuelectenerg-900	711	19	-	-	PUNCT
fuelectenerg-900	711	20	performance	performance	NOUN
fuelectenerg-900	711	21	bulk	bulk	ADJ
fuelectenerg-900	711	22	mode	mode	NOUN
fuelectenerg-900	711	23	single	single	ADJ
fuelectenerg-900	711	24	crystal	crystal	PROPN
fuelectenerg-900	711	25	silicon	silicon	NOUN
fuelectenerg-900	711	26	microresonator	microresonator	NOUN
fuelectenerg-900	711	27	based	base	VERB
fuelectenerg-900	711	28	on	on	ADP
fuelectenerg-900	711	29	a	a	DET
fuelectenerg-900	711	30	cavity	cavity	NOUN
fuelectenerg-900	711	31	-	-	PUNCT
fuelectenerg-900	711	32	soi	soi	ADJ
fuelectenerg-900	711	33	wafer	wafer	NOUN
fuelectenerg-900	711	34	,	,	PUNCT
fuelectenerg-900	711	35	j.	j.	PROPN
fuelectenerg-900	711	36	micromech	micromech	PROPN
fuelectenerg-900	711	37	.	.	PUNCT
fuelectenerg-900	712	1	microeng	microeng	PROPN
fuelectenerg-900	712	2	.	.	PUNCT
fuelectenerg-900	712	3	,	,	PUNCT
fuelectenerg-900	712	4	vol	vol	NOUN
fuelectenerg-900	712	5	.	.	PROPN
fuelectenerg-900	713	1	22	22	NUM
fuelectenerg-900	713	2	,	,	PUNCT
fuelectenerg-900	713	3	pp	pp	ADJ
fuelectenerg-900	713	4	.	.	PUNCT
fuelectenerg-900	714	1	025020	025020	NUM
fuelectenerg-900	714	2	1	1	NUM
fuelectenerg-900	714	3	-	-	SYM
fuelectenerg-900	714	4	8	8	NUM
fuelectenerg-900	714	5	,	,	PUNCT
fuelectenerg-900	714	6	2012	2012	NUM
fuelectenerg-900	714	7	.	.	PUNCT
fuelectenerg-900	715	1	[	[	X
fuelectenerg-900	715	2	25	25	NUM
fuelectenerg-900	715	3	]	]	PUNCT
fuelectenerg-900	715	4	y.-w	y.-w	PROPN
fuelectenerg-900	715	5	.	.	PUNCT
fuelectenerg-900	716	1	lin	lin	PROPN
fuelectenerg-900	716	2	,	,	PUNCT
fuelectenerg-900	716	3	s.-s	s.-s	PROPN
fuelectenerg-900	716	4	.	.	PUNCT
fuelectenerg-900	717	1	li	li	PROPN
fuelectenerg-900	717	2	,	,	PUNCT
fuelectenerg-900	717	3	z.	z.	PROPN
fuelectenerg-900	717	4	ren	ren	PROPN
fuelectenerg-900	717	5	and	and	CCONJ
fuelectenerg-900	717	6	c.	c.	PROPN
fuelectenerg-900	717	7	t.-c	t.-c	PROPN
fuelectenerg-900	717	8	.	.	PUNCT
fuelectenerg-900	718	1	nguyen	nguyen	NOUN
fuelectenerg-900	718	2	,	,	PUNCT
fuelectenerg-900	718	3	"	"	PUNCT
fuelectenerg-900	718	4	low	low	ADJ
fuelectenerg-900	718	5	phase	phase	NOUN
fuelectenerg-900	718	6	noise	noise	NOUN
fuelectenerg-900	718	7	array	array	NOUN
fuelectenerg-900	718	8	-	-	PUNCT
fuelectenerg-900	718	9	composite	composite	ADJ
fuelectenerg-900	718	10	micromechanical	micromechanical	ADJ
fuelectenerg-900	718	11	wine	wine	NOUN
fuelectenerg-900	718	12	-	-	PUNCT
fuelectenerg-900	718	13	glass	glass	NOUN
fuelectenerg-900	718	14	disk	disk	NOUN
fuelectenerg-900	718	15	oscillator	oscillator	NOUN
fuelectenerg-900	718	16	"	"	PUNCT
fuelectenerg-900	718	17	,	,	PUNCT
fuelectenerg-900	718	18	in	in	ADP
fuelectenerg-900	718	19	proceedings	proceeding	NOUN
fuelectenerg-900	718	20	of	of	ADP
fuelectenerg-900	718	21	the	the	DET
fuelectenerg-900	718	22	ieee	ieee	NOUN
fuelectenerg-900	718	23	international	international	PROPN
fuelectenerg-900	718	24	electron	electron	NOUN
fuelectenerg-900	718	25	devices	device	NOUN
fuelectenerg-900	718	26	meeting	meeting	NOUN
fuelectenerg-900	718	27	,	,	PUNCT
fuelectenerg-900	718	28	washington	washington	PROPN
fuelectenerg-900	718	29	dc	dc	PROPN
fuelectenerg-900	718	30	,	,	PUNCT
fuelectenerg-900	718	31	2005	2005	NUM
fuelectenerg-900	718	32	,	,	PUNCT
fuelectenerg-900	718	33	pp	pp	ADJ
fuelectenerg-900	718	34	.	.	PUNCT
fuelectenerg-900	719	1	287	287	NUM
fuelectenerg-900	719	2	-	-	SYM
fuelectenerg-900	719	3	290	290	NUM
fuelectenerg-900	719	4	.	.	PUNCT
fuelectenerg-900	720	1	[	[	X
fuelectenerg-900	720	2	26	26	NUM
fuelectenerg-900	720	3	]	]	PUNCT
fuelectenerg-900	720	4	m.	m.	NOUN
fuelectenerg-900	720	5	u.	u.	PROPN
fuelectenerg-900	720	6	demirci	demirci	PROPN
fuelectenerg-900	720	7	,	,	PUNCT
fuelectenerg-900	720	8	m.	m.	NOUN
fuelectenerg-900	720	9	a.	a.	PROPN
fuelectenerg-900	720	10	abdelmoneum	abdelmoneum	PROPN
fuelectenerg-900	720	11	and	and	CCONJ
fuelectenerg-900	720	12	c.	c.	PROPN
fuelectenerg-900	720	13	t.-c	t.-c	PROPN
fuelectenerg-900	720	14	.	.	PUNCT
fuelectenerg-900	721	1	nguyen	nguyen	PROPN
fuelectenerg-900	721	2	,	,	PUNCT
fuelectenerg-900	721	3	"	"	PUNCT
fuelectenerg-900	721	4	mechanically	mechanically	ADV
fuelectenerg-900	721	5	corner	corner	NOUN
fuelectenerg-900	721	6	-	-	PUNCT
fuelectenerg-900	721	7	coupled	couple	VERB
fuelectenerg-900	721	8	square	square	ADJ
fuelectenerg-900	721	9	microresonator	microresonator	NOUN
fuelectenerg-900	721	10	array	array	NOUN
fuelectenerg-900	721	11	for	for	ADP
fuelectenerg-900	721	12	reduced	reduce	VERB
fuelectenerg-900	721	13	series	series	NOUN
fuelectenerg-900	721	14	motional	motional	ADJ
fuelectenerg-900	721	15	resistance	resistance	NOUN
fuelectenerg-900	721	16	"	"	PUNCT
fuelectenerg-900	721	17	,	,	PUNCT
fuelectenerg-900	721	18	in	in	ADP
fuelectenerg-900	721	19	proceedings	proceeding	NOUN
fuelectenerg-900	721	20	of	of	ADP
fuelectenerg-900	721	21	the	the	DET
fuelectenerg-900	721	22	12th	12th	ADJ
fuelectenerg-900	721	23	international	international	ADJ
fuelectenerg-900	721	24	conference	conference	NOUN
fuelectenerg-900	721	25	on	on	ADP
fuelectenerg-900	721	26	solid	solid	ADJ
fuelectenerg-900	721	27	-	-	PUNCT
fuelectenerg-900	721	28	state	state	NOUN
fuelectenerg-900	721	29	sensors	sensor	NOUN
fuelectenerg-900	721	30	&	&	CCONJ
fuelectenerg-900	721	31	actuators	actuator	NOUN
fuelectenerg-900	721	32	(	(	PUNCT
fuelectenerg-900	721	33	transducers’03	transducers’03	PROPN
fuelectenerg-900	721	34	)	)	PUNCT
fuelectenerg-900	721	35	,	,	PUNCT
fuelectenerg-900	721	36	boston	boston	PROPN
fuelectenerg-900	721	37	,	,	PUNCT
fuelectenerg-900	721	38	massachussets	massachusset	NOUN
fuelectenerg-900	721	39	,	,	PUNCT
fuelectenerg-900	721	40	2003	2003	NUM
fuelectenerg-900	721	41	,	,	PUNCT
fuelectenerg-900	721	42	pp	pp	ADJ
fuelectenerg-900	721	43	.	.	PUNCT
fuelectenerg-900	722	1	955	955	NUM
fuelectenerg-900	722	2	-	-	SYM
fuelectenerg-900	722	3	958	958	NUM
fuelectenerg-900	722	4	.	.	PUNCT
fuelectenerg-900	723	1	[	[	X
fuelectenerg-900	723	2	27	27	NUM
fuelectenerg-900	723	3	]	]	PUNCT
fuelectenerg-900	723	4	s.-s	s.-	NOUN
fuelectenerg-900	723	5	.	.	PUNCT
fuelectenerg-900	724	1	li	li	PROPN
fuelectenerg-900	724	2	,	,	PUNCT
fuelectenerg-900	724	3	y.-w	y.-w	PROPN
fuelectenerg-900	724	4	.	.	PUNCT
fuelectenerg-900	725	1	lin	lin	PROPN
fuelectenerg-900	725	2	,	,	PUNCT
fuelectenerg-900	725	3	y.	y.	PROPN
fuelectenerg-900	725	4	xie	xie	PROPN
fuelectenerg-900	725	5	,	,	PUNCT
fuelectenerg-900	725	6	z.	z.	PROPN
fuelectenerg-900	725	7	ren	ren	PROPN
fuelectenerg-900	725	8	and	and	CCONJ
fuelectenerg-900	725	9	c.	c.	PROPN
fuelectenerg-900	725	10	t.-c	t.-c	PROPN
fuelectenerg-900	725	11	.	.	PUNCT
fuelectenerg-900	726	1	nguyen	nguyen	NOUN
fuelectenerg-900	726	2	,	,	PUNCT
fuelectenerg-900	726	3	"	"	PUNCT
fuelectenerg-900	726	4	micromechanical	micromechanical	ADJ
fuelectenerg-900	726	5	"	"	PUNCT
fuelectenerg-900	726	6	hollow	hollow	ADJ
fuelectenerg-900	726	7	-	-	PUNCT
fuelectenerg-900	726	8	disk	disk	NOUN
fuelectenerg-900	726	9	"	"	PUNCT
fuelectenerg-900	726	10	resonators	resonator	NOUN
fuelectenerg-900	726	11	"	"	PUNCT
fuelectenerg-900	726	12	,	,	PUNCT
fuelectenerg-900	726	13	in	in	ADP
fuelectenerg-900	726	14	proceedings	proceeding	NOUN
fuelectenerg-900	726	15	of	of	ADP
fuelectenerg-900	726	16	the	the	DET
fuelectenerg-900	726	17	17th	17th	ADJ
fuelectenerg-900	726	18	ieee	ieee	NOUN
fuelectenerg-900	726	19	international	international	PROPN
fuelectenerg-900	726	20	conference	conference	NOUN
fuelectenerg-900	726	21	on.micro	on.micro	ADP
fuelectenerg-900	726	22	electro	electro	VERB
fuelectenerg-900	726	23	mechanical	mechanical	ADJ
fuelectenerg-900	726	24	systems	system	NOUN
fuelectenerg-900	726	25	(	(	PUNCT
fuelectenerg-900	726	26	mems	mems	PROPN
fuelectenerg-900	726	27	2004	2004	NUM
fuelectenerg-900	726	28	)	)	PUNCT
fuelectenerg-900	726	29	,	,	PUNCT
fuelectenerg-900	726	30	2004	2004	NUM
fuelectenerg-900	726	31	,	,	PUNCT
fuelectenerg-900	726	32	pp	pp	ADP
fuelectenerg-900	726	33	.	.	PUNCT
fuelectenerg-900	727	1	821	821	NUM
fuelectenerg-900	727	2	-	-	SYM
fuelectenerg-900	727	3	824	824	NUM
fuelectenerg-900	727	4	.	.	PUNCT
fuelectenerg-900	728	1	[	[	X
fuelectenerg-900	728	2	28	28	NUM
fuelectenerg-900	728	3	]	]	X
fuelectenerg-900	728	4	p.	p.	NOUN
fuelectenerg-900	728	5	ovartchaiyapong	ovartchaiyapong	PROPN
fuelectenerg-900	728	6	,	,	PUNCT
fuelectenerg-900	728	7	l.	l.	PROPN
fuelectenerg-900	728	8	m.	m.	PROPN
fuelectenerg-900	728	9	a.	a.	PROPN
fuelectenerg-900	728	10	pascal	pascal	PROPN
fuelectenerg-900	728	11	,	,	PUNCT
fuelectenerg-900	728	12	b.	b.	PROPN
fuelectenerg-900	728	13	a.	a.	PROPN
fuelectenerg-900	728	14	myers	myers	PROPN
fuelectenerg-900	728	15	,	,	PUNCT
fuelectenerg-900	728	16	p.	p.	PROPN
fuelectenerg-900	728	17	lauria	lauria	PROPN
fuelectenerg-900	728	18	and	and	CCONJ
fuelectenerg-900	728	19	a.	a.	PROPN
fuelectenerg-900	728	20	c.	c.	PROPN
fuelectenerg-900	728	21	bleszynski	bleszynski	PROPN
fuelectenerg-900	728	22	jayich	jayich	PROPN
fuelectenerg-900	728	23	,	,	PUNCT
fuelectenerg-900	728	24	"	"	PUNCT
fuelectenerg-900	728	25	high	high	ADJ
fuelectenerg-900	728	26	quality	quality	NOUN
fuelectenerg-900	728	27	factor	factor	NOUN
fuelectenerg-900	728	28	single	single	ADJ
fuelectenerg-900	728	29	-	-	PUNCT
fuelectenerg-900	728	30	crystal	crystal	NOUN
fuelectenerg-900	728	31	diamond	diamond	NOUN
fuelectenerg-900	728	32	mechanical	mechanical	ADJ
fuelectenerg-900	728	33	resonators	resonator	NOUN
fuelectenerg-900	728	34	"	"	PUNCT
fuelectenerg-900	728	35	,	,	PUNCT
fuelectenerg-900	728	36	appl	appl	PROPN
fuelectenerg-900	728	37	.	.	PUNCT
fuelectenerg-900	729	1	phys	phy	NOUN
fuelectenerg-900	729	2	.	.	PUNCT
fuelectenerg-900	730	1	lett	lett	PROPN
fuelectenerg-900	730	2	.	.	PROPN
fuelectenerg-900	730	3	,	,	PUNCT
fuelectenerg-900	730	4	vol	vol	NOUN
fuelectenerg-900	730	5	.	.	PROPN
fuelectenerg-900	731	1	101	101	NUM
fuelectenerg-900	731	2	,	,	PUNCT
fuelectenerg-900	731	3	pp	pp	ADJ
fuelectenerg-900	731	4	.	.	PUNCT
fuelectenerg-900	732	1	163505	163505	NUM
fuelectenerg-900	732	2	1	1	NUM
fuelectenerg-900	732	3	-	-	SYM
fuelectenerg-900	732	4	4	4	NUM
fuelectenerg-900	732	5	,	,	PUNCT
fuelectenerg-900	732	6	2012	2012	NUM
fuelectenerg-900	732	7	.	.	PUNCT
fuelectenerg-900	733	1	[	[	X
fuelectenerg-900	733	2	29	29	NUM
fuelectenerg-900	733	3	]	]	PUNCT
fuelectenerg-900	733	4	j.	j.	PROPN
fuelectenerg-900	733	5	e.-y	e.-y	VERB
fuelectenerg-900	733	6	.	.	PUNCT
fuelectenerg-900	734	1	lee	lee	PROPN
fuelectenerg-900	734	2	and	and	CCONJ
fuelectenerg-900	734	3	a.	a.	NOUN
fuelectenerg-900	734	4	a.	a.	NOUN
fuelectenerg-900	734	5	seshia	seshia	PROPN
fuelectenerg-900	734	6	,	,	PUNCT
fuelectenerg-900	734	7	"	"	PUNCT
fuelectenerg-900	734	8	square	square	ADJ
fuelectenerg-900	734	9	wine	wine	NOUN
fuelectenerg-900	734	10	glass	glass	NOUN
fuelectenerg-900	734	11	mode	mode	NOUN
fuelectenerg-900	734	12	resonator	resonator	NOUN
fuelectenerg-900	734	13	with	with	ADP
fuelectenerg-900	734	14	quality	quality	NOUN
fuelectenerg-900	734	15	factor	factor	NOUN
fuelectenerg-900	734	16	of	of	ADP
fuelectenerg-900	734	17	4	4	NUM
fuelectenerg-900	734	18	million	million	NUM
fuelectenerg-900	734	19	"	"	PUNCT
fuelectenerg-900	734	20	,	,	PUNCT
fuelectenerg-900	734	21	in	in	ADP
fuelectenerg-900	734	22	proceedings	proceeding	NOUN
fuelectenerg-900	734	23	of	of	ADP
fuelectenerg-900	734	24	the	the	DET
fuelectenerg-900	734	25	7th	7th	ADJ
fuelectenerg-900	734	26	ieee	ieee	NOUN
fuelectenerg-900	734	27	conference	conference	NOUN
fuelectenerg-900	734	28	on	on	ADP
fuelectenerg-900	734	29	sensors	sensor	NOUN
fuelectenerg-900	734	30	,	,	PUNCT
fuelectenerg-900	734	31	lecce	lecce	PROPN
fuelectenerg-900	734	32	,	,	PUNCT
fuelectenerg-900	734	33	italy	italy	PROPN
fuelectenerg-900	734	34	,	,	PUNCT
fuelectenerg-900	734	35	pp	pp	X
fuelectenerg-900	734	36	.	.	PUNCT
fuelectenerg-900	735	1	1257–1260	1257–1260	NUM
fuelectenerg-900	735	2	,	,	PUNCT
fuelectenerg-900	735	3	2008	2008	NUM
fuelectenerg-900	735	4	.	.	PUNCT
fuelectenerg-900	736	1	[	[	X
fuelectenerg-900	736	2	30	30	NUM
fuelectenerg-900	736	3	]	]	X
fuelectenerg-900	736	4	d.	d.	PROPN
fuelectenerg-900	736	5	weinstein	weinstein	PROPN
fuelectenerg-900	736	6	and	and	CCONJ
fuelectenerg-900	736	7	s.	s.	PROPN
fuelectenerg-900	736	8	a.	a.	PROPN
fuelectenerg-900	736	9	bhave	bhave	PROPN
fuelectenerg-900	736	10	,	,	PUNCT
fuelectenerg-900	736	11	"	"	PUNCT
fuelectenerg-900	736	12	internal	internal	ADJ
fuelectenerg-900	736	13	dielectric	dielectric	ADJ
fuelectenerg-900	736	14	transduction	transduction	NOUN
fuelectenerg-900	736	15	in	in	ADP
fuelectenerg-900	736	16	bulk	bulk	ADJ
fuelectenerg-900	736	17	-	-	PUNCT
fuelectenerg-900	736	18	mode	mode	NOUN
fuelectenerg-900	736	19	resonators	resonator	NOUN
fuelectenerg-900	736	20	"	"	PUNCT
fuelectenerg-900	736	21	,	,	PUNCT
fuelectenerg-900	736	22	j.	j.	PROPN
fuelectenerg-900	736	23	microelectromech	microelectromech	PROPN
fuelectenerg-900	736	24	.	.	PUNCT
fuelectenerg-900	737	1	syst	syst	PROPN
fuelectenerg-900	737	2	.	.	PUNCT
fuelectenerg-900	737	3	,	,	PUNCT
fuelectenerg-900	737	4	vol	vol	NOUN
fuelectenerg-900	737	5	.	.	PROPN
fuelectenerg-900	737	6	18	18	NUM
fuelectenerg-900	737	7	,	,	PUNCT
fuelectenerg-900	737	8	pp	pp	ADJ
fuelectenerg-900	737	9	.	.	PUNCT
fuelectenerg-900	738	1	1401–1408	1401–1408	NUM
fuelectenerg-900	738	2	,	,	PUNCT
fuelectenerg-900	738	3	2009	2009	NUM
fuelectenerg-900	738	4	.	.	PUNCT
fuelectenerg-900	739	1	[	[	X
fuelectenerg-900	739	2	31	31	NUM
fuelectenerg-900	739	3	]	]	PUNCT
fuelectenerg-900	739	4	r.	r.	PROPN
fuelectenerg-900	739	5	henry	henry	PROPN
fuelectenerg-900	739	6	and	and	CCONJ
fuelectenerg-900	739	7	d.	d.	PROPN
fuelectenerg-900	739	8	kenny	kenny	PROPN
fuelectenerg-900	739	9	,	,	PUNCT
fuelectenerg-900	739	10	"	"	PUNCT
fuelectenerg-900	739	11	comparative	comparative	ADJ
fuelectenerg-900	739	12	analysis	analysis	NOUN
fuelectenerg-900	739	13	of	of	ADP
fuelectenerg-900	739	14	mems	mem	NOUN
fuelectenerg-900	739	15	,	,	PUNCT
fuelectenerg-900	739	16	programmable	programmable	ADJ
fuelectenerg-900	739	17	,	,	PUNCT
fuelectenerg-900	739	18	and	and	CCONJ
fuelectenerg-900	739	19	synthesized	synthesize	VERB
fuelectenerg-900	739	20	frequency	frequency	NOUN
fuelectenerg-900	739	21	control	control	NOUN
fuelectenerg-900	739	22	devices	device	NOUN
fuelectenerg-900	739	23	versus	versus	ADP
fuelectenerg-900	739	24	traditional	traditional	ADJ
fuelectenerg-900	739	25	quartz	quartz	NOUN
fuelectenerg-900	739	26	based	base	VERB
fuelectenerg-900	739	27	devices	device	NOUN
fuelectenerg-900	739	28	"	"	PUNCT
fuelectenerg-900	739	29	,	,	PUNCT
fuelectenerg-900	739	30	in	in	ADP
fuelectenerg-900	739	31	proceedings	proceeding	NOUN
fuelectenerg-900	739	32	of	of	ADP
fuelectenerg-900	739	33	the	the	DET
fuelectenerg-900	739	34	ieee	ieee	NOUN
fuelectenerg-900	739	35	frequency	frequency	PROPN
fuelectenerg-900	739	36	control	control	PROPN
fuelectenerg-900	739	37	symposium	symposium	NOUN
fuelectenerg-900	739	38	,	,	PUNCT
fuelectenerg-900	739	39	honolulu	honolulu	PROPN
fuelectenerg-900	739	40	,	,	PUNCT
fuelectenerg-900	739	41	hi	hi	INTJ
fuelectenerg-900	739	42	,	,	PUNCT
fuelectenerg-900	739	43	2008	2008	NUM
fuelectenerg-900	739	44	,	,	PUNCT
fuelectenerg-900	739	45	pp	pp	ADJ
fuelectenerg-900	739	46	.	.	PUNCT
fuelectenerg-900	740	1	396–401	396–401	NUM
fuelectenerg-900	740	2	.	.	PUNCT
fuelectenerg-900	741	1	[	[	X
fuelectenerg-900	741	2	32	32	NUM
fuelectenerg-900	741	3	]	]	PUNCT
fuelectenerg-900	741	4	j.	j.	PROPN
fuelectenerg-900	741	5	l.	l.	PROPN
fuelectenerg-900	741	6	lopez	lopez	PROPN
fuelectenerg-900	741	7	,	,	PUNCT
fuelectenerg-900	741	8	j.	j.	PROPN
fuelectenerg-900	741	9	verd	verd	PROPN
fuelectenerg-900	741	10	,	,	PUNCT
fuelectenerg-900	741	11	j.	j.	PROPN
fuelectenerg-900	741	12	teva	teva	PROPN
fuelectenerg-900	741	13	,	,	PUNCT
fuelectenerg-900	741	14	g.	g.	PROPN
fuelectenerg-900	741	15	murillo	murillo	PROPN
fuelectenerg-900	741	16	,	,	PUNCT
fuelectenerg-900	741	17	j.	j.	PROPN
fuelectenerg-900	741	18	giner	giner	PROPN
fuelectenerg-900	741	19	,	,	PUNCT
fuelectenerg-900	741	20	f.	f.	PROPN
fuelectenerg-900	741	21	torres	torres	PROPN
fuelectenerg-900	741	22	,	,	PUNCT
fuelectenerg-900	741	23	a.	a.	NOUN
fuelectenerg-900	741	24	uranga	uranga	PROPN
fuelectenerg-900	741	25	,	,	PUNCT
fuelectenerg-900	741	26	g.	g.	PROPN
fuelectenerg-900	741	27	abadal	abadal	PROPN
fuelectenerg-900	741	28	and	and	CCONJ
fuelectenerg-900	741	29	n.	n.	PROPN
fuelectenerg-900	741	30	barniol	barniol	NOUN
fuelectenerg-900	741	31	,	,	PUNCT
fuelectenerg-900	741	32	"	"	PUNCT
fuelectenerg-900	741	33	integration	integration	NOUN
fuelectenerg-900	741	34	of	of	ADP
fuelectenerg-900	741	35	rf	rf	ADJ
fuelectenerg-900	741	36	-	-	PUNCT
fuelectenerg-900	741	37	mems	mems	ADJ
fuelectenerg-900	741	38	resonators	resonator	NOUN
fuelectenerg-900	741	39	on	on	ADP
fuelectenerg-900	741	40	submicrometric	submicrometric	ADJ
fuelectenerg-900	741	41	commercial	commercial	PROPN
fuelectenerg-900	741	42	cmos	cmos	PROPN
fuelectenerg-900	741	43	technologies	technology	NOUN
fuelectenerg-900	741	44	"	"	PUNCT
fuelectenerg-900	741	45	,	,	PUNCT
fuelectenerg-900	741	46	j.	j.	PROPN
fuelectenerg-900	741	47	micromech	micromech	PROPN
fuelectenerg-900	741	48	.	.	PUNCT
fuelectenerg-900	742	1	microeng	microeng	PROPN
fuelectenerg-900	742	2	.	.	PUNCT
fuelectenerg-900	742	3	,	,	PUNCT
fuelectenerg-900	742	4	vol	vol	NOUN
fuelectenerg-900	742	5	.	.	PROPN
fuelectenerg-900	742	6	19	19	NUM
fuelectenerg-900	742	7	,	,	PUNCT
fuelectenerg-900	742	8	pp	pp	ADJ
fuelectenerg-900	742	9	.	.	PUNCT
fuelectenerg-900	742	10	015002	015002	NUM
fuelectenerg-900	743	1	1	1	NUM
fuelectenerg-900	743	2	-	-	SYM
fuelectenerg-900	743	3	10	10	NUM
fuelectenerg-900	743	4	,	,	PUNCT
fuelectenerg-900	743	5	2009	2009	NUM
fuelectenerg-900	743	6	.	.	PUNCT
fuelectenerg-900	744	1	[	[	X
fuelectenerg-900	744	2	33	33	NUM
fuelectenerg-900	744	3	]	]	PUNCT
fuelectenerg-900	744	4	a.	a.	NOUN
fuelectenerg-900	744	5	n.	n.	PROPN
fuelectenerg-900	744	6	nordin	nordin	PROPN
fuelectenerg-900	744	7	and	and	CCONJ
fuelectenerg-900	744	8	m.	m.	PROPN
fuelectenerg-900	744	9	e.	e.	PROPN
fuelectenerg-900	744	10	zaghloul	zaghloul	PROPN
fuelectenerg-900	744	11	,	,	PUNCT
fuelectenerg-900	744	12	"	"	PUNCT
fuelectenerg-900	744	13	modeling	modeling	NOUN
fuelectenerg-900	744	14	and	and	CCONJ
fuelectenerg-900	744	15	fabrication	fabrication	NOUN
fuelectenerg-900	744	16	of	of	ADP
fuelectenerg-900	744	17	cmos	cmos	PROPN
fuelectenerg-900	744	18	surface	surface	NOUN
fuelectenerg-900	744	19	acoustic	acoustic	ADJ
fuelectenerg-900	744	20	wave	wave	NOUN
fuelectenerg-900	744	21	resonators	resonator	NOUN
fuelectenerg-900	744	22	"	"	PUNCT
fuelectenerg-900	744	23	,	,	PUNCT
fuelectenerg-900	744	24	ieee	ieee	NOUN
fuelectenerg-900	744	25	trans	tran	NOUN
fuelectenerg-900	744	26	.	.	PUNCT
fuelectenerg-900	745	1	on	on	ADP
fuelectenerg-900	745	2	microwave	microwave	NOUN
fuelectenerg-900	745	3	theory	theory	NOUN
fuelectenerg-900	745	4	tech	tech	NOUN
fuelectenerg-900	745	5	.	.	PUNCT
fuelectenerg-900	745	6	,	,	PUNCT
fuelectenerg-900	745	7	vol	vol	NOUN
fuelectenerg-900	745	8	.	.	PROPN
fuelectenerg-900	745	9	55	55	NUM
fuelectenerg-900	745	10	,	,	PUNCT
fuelectenerg-900	745	11	pp	pp	ADJ
fuelectenerg-900	745	12	.	.	PUNCT
fuelectenerg-900	746	1	992	992	NUM
fuelectenerg-900	746	2	-	-	SYM
fuelectenerg-900	746	3	1001	1001	NUM
fuelectenerg-900	746	4	,	,	PUNCT
fuelectenerg-900	746	5	2007	2007	NUM
fuelectenerg-900	746	6	.	.	PUNCT
fuelectenerg-900	747	1	[	[	X
fuelectenerg-900	747	2	34	34	NUM
fuelectenerg-900	747	3	]	]	X
fuelectenerg-900	747	4	h.	h.	PROPN
fuelectenerg-900	747	5	campanella	campanella	PROPN
fuelectenerg-900	747	6	,	,	PUNCT
fuelectenerg-900	747	7	e.	e.	PROPN
fuelectenerg-900	747	8	cabruja	cabruja	PROPN
fuelectenerg-900	747	9	,	,	PUNCT
fuelectenerg-900	747	10	e.	e.	PROPN
fuelectenerg-900	747	11	,	,	PUNCT
fuelectenerg-900	747	12	j.	j.	PROPN
fuelectenerg-900	747	13	montserrat	montserrat	PROPN
fuelectenerg-900	747	14	,	,	PUNCT
fuelectenerg-900	747	15	a.	a.	NOUN
fuelectenerg-900	747	16	uranga	uranga	PROPN
fuelectenerg-900	747	17	,	,	PUNCT
fuelectenerg-900	747	18	n.	n.	NOUN
fuelectenerg-900	747	19	barniol	barniol	NOUN
fuelectenerg-900	747	20	and	and	CCONJ
fuelectenerg-900	747	21	j.	j.	PROPN
fuelectenerg-900	747	22	esteve	esteve	PROPN
fuelectenerg-900	747	23	,	,	PUNCT
fuelectenerg-900	747	24	"	"	PUNCT
fuelectenerg-900	747	25	thin	thin	ADJ
fuelectenerg-900	747	26	-	-	PUNCT
fuelectenerg-900	747	27	film	film	NOUN
fuelectenerg-900	747	28	bulk	bulk	ADJ
fuelectenerg-900	747	29	acoustic	acoustic	ADJ
fuelectenerg-900	747	30	wave	wave	NOUN
fuelectenerg-900	747	31	resonator	resonator	NOUN
fuelectenerg-900	747	32	floating	float	VERB
fuelectenerg-900	747	33	above	above	ADP
fuelectenerg-900	747	34	cmos	cmos	ADJ
fuelectenerg-900	747	35	substrate	substrate	NOUN
fuelectenerg-900	747	36	"	"	PUNCT
fuelectenerg-900	747	37	,	,	PUNCT
fuelectenerg-900	747	38	ieee	ieee	NOUN
fuelectenerg-900	747	39	electron	electron	NOUN
fuelectenerg-900	747	40	device	device	NOUN
fuelectenerg-900	747	41	lett	lett	PROPN
fuelectenerg-900	747	42	.	.	PUNCT
fuelectenerg-900	747	43	,	,	PUNCT
fuelectenerg-900	747	44	vol	vol	NOUN
fuelectenerg-900	747	45	.	.	PROPN
fuelectenerg-900	747	46	29	29	NUM
fuelectenerg-900	747	47	,	,	PUNCT
fuelectenerg-900	747	48	pp	pp	ADJ
fuelectenerg-900	747	49	.	.	PUNCT
fuelectenerg-900	748	1	28	28	NUM
fuelectenerg-900	748	2	-	-	SYM
fuelectenerg-900	748	3	30	30	NUM
fuelectenerg-900	748	4	,	,	PUNCT
fuelectenerg-900	748	5	2008	2008	NUM
fuelectenerg-900	748	6	.	.	PUNCT
fuelectenerg-900	749	1	[	[	X
fuelectenerg-900	749	2	35	35	NUM
fuelectenerg-900	749	3	]	]	PUNCT
fuelectenerg-900	749	4	m.	m.	NOUN
fuelectenerg-900	749	5	hara	hara	PROPN
fuelectenerg-900	749	6	,	,	PUNCT
fuelectenerg-900	749	7	j.	j.	PROPN
fuelectenerg-900	749	8	kuypers	kuypers	PROPN
fuelectenerg-900	749	9	,	,	PUNCT
fuelectenerg-900	749	10	t.	t.	PROPN
fuelectenerg-900	749	11	abe	abe	PROPN
fuelectenerg-900	749	12	and	and	CCONJ
fuelectenerg-900	749	13	m.	m.	PROPN
fuelectenerg-900	749	14	esashi	esashi	PROPN
fuelectenerg-900	749	15	,	,	PUNCT
fuelectenerg-900	749	16	"	"	PUNCT
fuelectenerg-900	749	17	mems	mem	NOUN
fuelectenerg-900	749	18	based	base	VERB
fuelectenerg-900	749	19	thin	thin	ADJ
fuelectenerg-900	749	20	film	film	NOUN
fuelectenerg-900	749	21	2	2	NUM
fuelectenerg-900	749	22	ghz	ghz	NOUN
fuelectenerg-900	749	23	resonator	resonator	NOUN
fuelectenerg-900	749	24	for	for	ADP
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fuelectenerg-900	749	27	"	"	PUNCT
fuelectenerg-900	749	28	,	,	PUNCT
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fuelectenerg-900	749	33	mtt	mtt	PROPN
fuelectenerg-900	749	34	-	-	PUNCT
fuelectenerg-900	749	35	s	s	NOUN
fuelectenerg-900	749	36	international	international	ADJ
fuelectenerg-900	749	37	microwave	microwave	NOUN
fuelectenerg-900	749	38	symposium	symposium	NOUN
fuelectenerg-900	749	39	digest	digest	PROPN
fuelectenerg-900	749	40	,	,	PUNCT
fuelectenerg-900	749	41	philadelphia	philadelphia	PROPN
fuelectenerg-900	749	42	,	,	PUNCT
fuelectenerg-900	749	43	pa	pa	PROPN
fuelectenerg-900	749	44	,	,	PUNCT
fuelectenerg-900	749	45	2003	2003	NUM
fuelectenerg-900	749	46	,	,	PUNCT
fuelectenerg-900	749	47	vol	vol	NOUN
fuelectenerg-900	749	48	.	.	PROPN
fuelectenerg-900	750	1	3	3	NUM
fuelectenerg-900	750	2	,	,	PUNCT
fuelectenerg-900	750	3	pp	pp	ADJ
fuelectenerg-900	750	4	.	.	PUNCT
fuelectenerg-900	751	1	1797	1797	NUM
fuelectenerg-900	751	2	-	-	SYM
fuelectenerg-900	751	3	1800	1800	NUM
fuelectenerg-900	751	4	.	.	PUNCT
fuelectenerg-900	752	1	[	[	X
fuelectenerg-900	752	2	36	36	NUM
fuelectenerg-900	752	3	]	]	PUNCT
fuelectenerg-900	752	4	b.	b.	PROPN
fuelectenerg-900	753	1	p.	p.	NOUN
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fuelectenerg-900	753	7	,	,	PUNCT
fuelectenerg-900	753	8	"	"	PUNCT
fuelectenerg-900	753	9	a	a	DET
fuelectenerg-900	753	10	300-w	300-w	NUM
fuelectenerg-900	753	11	1.9	1.9	NUM
fuelectenerg-900	753	12	-	-	PUNCT
fuelectenerg-900	753	13	ghz	ghz	NOUN
fuelectenerg-900	753	14	cmos	cmos	NOUN
fuelectenerg-900	753	15	oscillator	oscillator	NOUN
fuelectenerg-900	753	16	utilizing	utilize	VERB
fuelectenerg-900	753	17	micromachined	micromachine	VERB
fuelectenerg-900	753	18	resonators	resonator	NOUN
fuelectenerg-900	753	19	"	"	PUNCT
fuelectenerg-900	753	20	,	,	PUNCT
fuelectenerg-900	753	21	ieee	ieee	PROPN
fuelectenerg-900	753	22	j.	j.	PROPN
fuelectenerg-900	753	23	solid	solid	PROPN
fuelectenerg-900	753	24	-	-	PUNCT
fuelectenerg-900	753	25	state	state	NOUN
fuelectenerg-900	753	26	circuits	circuit	NOUN
fuelectenerg-900	753	27	,	,	PUNCT
fuelectenerg-900	753	28	vol	vol	NOUN
fuelectenerg-900	753	29	.	.	PROPN
fuelectenerg-900	754	1	38	38	NUM
fuelectenerg-900	754	2	,	,	PUNCT
fuelectenerg-900	754	3	pp	pp	ADJ
fuelectenerg-900	754	4	.	.	PUNCT
fuelectenerg-900	755	1	1271	1271	NUM
fuelectenerg-900	755	2	-	-	SYM
fuelectenerg-900	755	3	1274	1274	NUM
fuelectenerg-900	755	4	,	,	PUNCT
fuelectenerg-900	755	5	2003	2003	NUM
fuelectenerg-900	755	6	.	.	PUNCT
fuelectenerg-900	756	1	[	[	X
fuelectenerg-900	756	2	37	37	NUM
fuelectenerg-900	756	3	]	]	PUNCT
fuelectenerg-900	756	4	j.	j.	PROPN
fuelectenerg-900	756	5	s.	s.	PROPN
fuelectenerg-900	756	6	wang	wang	PROPN
fuelectenerg-900	756	7	and	and	CCONJ
fuelectenerg-900	756	8	k.	k.	PROPN
fuelectenerg-900	756	9	m.	m.	PROPN
fuelectenerg-900	756	10	lakin	lakin	PROPN
fuelectenerg-900	756	11	,	,	PUNCT
fuelectenerg-900	756	12	"	"	PUNCT
fuelectenerg-900	756	13	sputtered	sputter	VERB
fuelectenerg-900	756	14	aln	aln	PROPN
fuelectenerg-900	756	15	films	film	NOUN
fuelectenerg-900	756	16	for	for	ADP
fuelectenerg-900	756	17	bulk	bulk	ADJ
fuelectenerg-900	756	18	-	-	PUNCT
fuelectenerg-900	756	19	acoustic	acoustic	ADJ
fuelectenerg-900	756	20	-	-	PUNCT
fuelectenerg-900	756	21	wave	wave	NOUN
fuelectenerg-900	756	22	devices	device	NOUN
fuelectenerg-900	756	23	"	"	PUNCT
fuelectenerg-900	756	24	,	,	PUNCT
fuelectenerg-900	756	25	in	in	ADP
fuelectenerg-900	756	26	proceedings	proceeding	NOUN
fuelectenerg-900	756	27	of	of	ADP
fuelectenerg-900	756	28	ultrasonics	ultrasonics	PROPN
fuelectenerg-900	756	29	symposium	symposium	NOUN
fuelectenerg-900	756	30	,	,	PUNCT
fuelectenerg-900	756	31	chicago	chicago	PROPN
fuelectenerg-900	756	32	,	,	PUNCT
fuelectenerg-900	756	33	il	il	PROPN
fuelectenerg-900	756	34	,	,	PUNCT
fuelectenerg-900	756	35	1981	1981	NUM
fuelectenerg-900	756	36	,	,	PUNCT
fuelectenerg-900	756	37	pp	pp	ADV
fuelectenerg-900	756	38	.	.	PUNCT
fuelectenerg-900	757	1	502	502	NUM
fuelectenerg-900	757	2	-	-	SYM
fuelectenerg-900	757	3	505	505	NUM
fuelectenerg-900	757	4	.	.	PUNCT
fuelectenerg-900	758	1	[	[	X
fuelectenerg-900	758	2	38	38	NUM
fuelectenerg-900	758	3	]	]	PUNCT
fuelectenerg-900	758	4	m.	m.	NOUN
fuelectenerg-900	758	5	a.	a.	PROPN
fuelectenerg-900	758	6	dubois	dubois	PROPN
fuelectenerg-900	758	7	,	,	PUNCT
fuelectenerg-900	758	8	j.	j.	PROPN
fuelectenerg-900	758	9	f.	f.	PROPN
fuelectenerg-900	758	10	carpentier	carpentier	PROPN
fuelectenerg-900	758	11	p.	p.	PROPN
fuelectenerg-900	758	12	vincent	vincent	PROPN
fuelectenerg-900	758	13	,	,	PUNCT
fuelectenerg-900	758	14	c.	c.	PROPN
fuelectenerg-900	758	15	billard	billard	PROPN
fuelectenerg-900	758	16	,	,	PUNCT
fuelectenerg-900	758	17	g.	g.	PROPN
fuelectenerg-900	758	18	parat	parat	PROPN
fuelectenerg-900	758	19	,	,	PUNCT
fuelectenerg-900	758	20	c.	c.	PROPN
fuelectenerg-900	758	21	muller	muller	PROPN
fuelectenerg-900	758	22	,	,	PUNCT
fuelectenerg-900	758	23	p.	p.	NOUN
fuelectenerg-900	758	24	ancey	ancey	NOUN
fuelectenerg-900	758	25	and	and	CCONJ
fuelectenerg-900	758	26	p.	p.	PROPN
fuelectenerg-900	758	27	conti	conti	PROPN
fuelectenerg-900	758	28	,	,	PUNCT
fuelectenerg-900	758	29	"	"	PUNCT
fuelectenerg-900	758	30	monolithic	monolithic	ADJ
fuelectenerg-900	758	31	above	above	ADP
fuelectenerg-900	758	32	-	-	PUNCT
fuelectenerg-900	758	33	ic	ic	NOUN
fuelectenerg-900	758	34	resonator	resonator	NOUN
fuelectenerg-900	758	35	technology	technology	NOUN
fuelectenerg-900	758	36	for	for	ADP
fuelectenerg-900	758	37	integrated	integrated	ADJ
fuelectenerg-900	758	38	architectures	architecture	NOUN
fuelectenerg-900	758	39	in	in	ADP
fuelectenerg-900	758	40	mobile	mobile	ADJ
fuelectenerg-900	758	41	and	and	CCONJ
fuelectenerg-900	758	42	wireless	wireless	ADJ
fuelectenerg-900	758	43	communication	communication	NOUN
fuelectenerg-900	758	44	"	"	PUNCT
fuelectenerg-900	758	45	,	,	PUNCT
fuelectenerg-900	758	46	ieee	ieee	PROPN
fuelectenerg-900	758	47	j.	j.	PROPN
fuelectenerg-900	758	48	solid	solid	PROPN
fuelectenerg-900	758	49	-	-	PUNCT
fuelectenerg-900	758	50	state	state	NOUN
fuelectenerg-900	758	51	circuits	circuit	NOUN
fuelectenerg-900	758	52	,	,	PUNCT
fuelectenerg-900	758	53	vol	vol	NOUN
fuelectenerg-900	758	54	.	.	PROPN
fuelectenerg-900	758	55	41	41	NUM
fuelectenerg-900	758	56	,	,	PUNCT
fuelectenerg-900	758	57	pp	pp	ADJ
fuelectenerg-900	758	58	.	.	PUNCT
fuelectenerg-900	759	1	7–16	7–16	NOUN
fuelectenerg-900	759	2	,	,	PUNCT
fuelectenerg-900	759	3	2006	2006	NUM
fuelectenerg-900	759	4	.	.	PUNCT
fuelectenerg-900	760	1	[	[	X
fuelectenerg-900	760	2	39	39	NUM
fuelectenerg-900	760	3	]	]	PUNCT
fuelectenerg-900	760	4	b.	b.	PROPN
fuelectenerg-900	760	5	p.	p.	PROPN
fuelectenerg-900	760	6	harrington	harrington	PROPN
fuelectenerg-900	760	7	,	,	PUNCT
fuelectenerg-900	760	8	m.	m.	NOUN
fuelectenerg-900	760	9	shahmohammadi	shahmohammadi	NOUN
fuelectenerg-900	760	10	and	and	CCONJ
fuelectenerg-900	760	11	r.	r.	PROPN
fuelectenerg-900	760	12	abdolvand	abdolvand	PROPN
fuelectenerg-900	760	13	,	,	PUNCT
fuelectenerg-900	760	14	"	"	PUNCT
fuelectenerg-900	760	15	toward	toward	ADP
fuelectenerg-900	760	16	ultimate	ultimate	ADJ
fuelectenerg-900	760	17	performance	performance	NOUN
fuelectenerg-900	760	18	in	in	ADP
fuelectenerg-900	760	19	ghz	ghz	NOUN
fuelectenerg-900	760	20	mems	mem	NOUN
fuelectenerg-900	760	21	resonators	resonator	NOUN
fuelectenerg-900	760	22	:	:	PUNCT
fuelectenerg-900	760	23	low	low	ADJ
fuelectenerg-900	760	24	impedance	impedance	NOUN
fuelectenerg-900	760	25	and	and	CCONJ
fuelectenerg-900	760	26	high	high	ADJ
fuelectenerg-900	760	27	q	q	NOUN
fuelectenerg-900	760	28	"	"	PUNCT
fuelectenerg-900	760	29	,	,	PUNCT
fuelectenerg-900	760	30	in	in	ADP
fuelectenerg-900	760	31	proceedings	proceeding	NOUN
fuelectenerg-900	760	32	of	of	ADP
fuelectenerg-900	760	33	the	the	DET
fuelectenerg-900	760	34	23rd	23rd	ADJ
fuelectenerg-900	760	35	ieee	ieee	NOUN
fuelectenerg-900	760	36	international	international	ADJ
fuelectenerg-900	760	37	conference	conference	NOUN
fuelectenerg-900	760	38	on	on	ADP
fuelectenerg-900	760	39	micro	micro	X
fuelectenerg-900	760	40	electro	electro	VERB
fuelectenerg-900	760	41	mechanical	mechanical	ADJ
fuelectenerg-900	760	42	systems	system	NOUN
fuelectenerg-900	760	43	(	(	PUNCT
fuelectenerg-900	760	44	mems	mems	PROPN
fuelectenerg-900	760	45	)	)	PUNCT
fuelectenerg-900	760	46	,	,	PUNCT
fuelectenerg-900	760	47	wanchai	wanchai	PROPN
fuelectenerg-900	760	48	,	,	PUNCT
fuelectenerg-900	760	49	hong	hong	PROPN
fuelectenerg-900	760	50	kong	kong	PROPN
fuelectenerg-900	760	51	,	,	PUNCT
fuelectenerg-900	760	52	2010	2010	NUM
fuelectenerg-900	760	53	,	,	PUNCT
fuelectenerg-900	760	54	pp	pp	ADJ
fuelectenerg-900	760	55	.	.	PUNCT
fuelectenerg-900	761	1	707	707	NUM
fuelectenerg-900	761	2	-	-	SYM
fuelectenerg-900	761	3	710	710	NUM
fuelectenerg-900	761	4	.	.	PUNCT
fuelectenerg-900	762	1	[	[	X
fuelectenerg-900	762	2	40	40	NUM
fuelectenerg-900	762	3	]	]	PUNCT
fuelectenerg-900	762	4	l.	l.	PROPN
fuelectenerg-900	762	5	khine	khine	PROPN
fuelectenerg-900	762	6	,	,	PUNCT
fuelectenerg-900	762	7	"	"	PUNCT
fuelectenerg-900	762	8	performance	performance	NOUN
fuelectenerg-900	762	9	parameters	parameter	NOUN
fuelectenerg-900	762	10	of	of	ADP
fuelectenerg-900	762	11	micromechanical	micromechanical	ADJ
fuelectenerg-900	762	12	resonators	resonator	NOUN
fuelectenerg-900	762	13	"	"	PUNCT
fuelectenerg-900	762	14	,	,	PUNCT
fuelectenerg-900	762	15	phd	phd	NOUN
fuelectenerg-900	762	16	.	.	PUNCT
fuelectenerg-900	763	1	thesis	thesis	PROPN
fuelectenerg-900	763	2	,	,	PUNCT
fuelectenerg-900	763	3	national	national	PROPN
fuelectenerg-900	763	4	university	university	PROPN
fuelectenerg-900	763	5	of	of	ADP
fuelectenerg-900	763	6	singapore	singapore	PROPN
fuelectenerg-900	763	7	,	,	PUNCT
fuelectenerg-900	763	8	2010	2010	NUM
fuelectenerg-900	763	9	.	.	PUNCT
fuelectenerg-900	764	1	[	[	X
fuelectenerg-900	764	2	41	41	NUM
fuelectenerg-900	764	3	]	]	PUNCT
fuelectenerg-900	764	4	j.	j.	PROPN
fuelectenerg-900	764	5	wang	wang	PROPN
fuelectenerg-900	764	6	,	,	PUNCT
fuelectenerg-900	764	7	z.	z.	PROPN
fuelectenerg-900	764	8	ren	ren	PROPN
fuelectenerg-900	764	9	and	and	CCONJ
fuelectenerg-900	764	10	c.	c.	PROPN
fuelectenerg-900	764	11	t.-c	t.-c	PROPN
fuelectenerg-900	764	12	.	.	PUNCT
fuelectenerg-900	765	1	nguyen	nguyen	NOUN
fuelectenerg-900	765	2	,	,	PUNCT
fuelectenerg-900	765	3	"	"	PUNCT
fuelectenerg-900	765	4	1.156	1.156	NUM
fuelectenerg-900	765	5	-	-	PUNCT
fuelectenerg-900	765	6	ghz	ghz	NOUN
fuelectenerg-900	765	7	self	self	NOUN
fuelectenerg-900	765	8	-	-	PUNCT
fuelectenerg-900	765	9	aligned	align	VERB
fuelectenerg-900	765	10	vibrating	vibrate	VERB
fuelectenerg-900	765	11	micromechanical	micromechanical	ADJ
fuelectenerg-900	765	12	disk	disk	NOUN
fuelectenerg-900	765	13	resonator	resonator	NOUN
fuelectenerg-900	765	14	"	"	PUNCT
fuelectenerg-900	765	15	,	,	PUNCT
fuelectenerg-900	765	16	ieee	ieee	PROPN
fuelectenerg-900	765	17	trans	trans	PROPN
fuelectenerg-900	765	18	.	.	PUNCT
fuelectenerg-900	766	1	ultrason	ultrason	PROPN
fuelectenerg-900	766	2	.	.	PUNCT
fuelectenerg-900	767	1	ferroelect	ferroelect	PROPN
fuelectenerg-900	767	2	.	.	PUNCT
fuelectenerg-900	768	1	freq	freq	PROPN
fuelectenerg-900	768	2	.	.	PUNCT
fuelectenerg-900	769	1	control	control	NOUN
fuelectenerg-900	769	2	,	,	PUNCT
fuelectenerg-900	769	3	vol	vol	NOUN
fuelectenerg-900	769	4	.	.	PROPN
fuelectenerg-900	769	5	51	51	NUM
fuelectenerg-900	769	6	,	,	PUNCT
fuelectenerg-900	769	7	pp	pp	ADJ
fuelectenerg-900	769	8	.	.	PUNCT
fuelectenerg-900	770	1	1607	1607	NUM
fuelectenerg-900	770	2	-	-	SYM
fuelectenerg-900	770	3	1628	1628	NUM
fuelectenerg-900	770	4	,	,	PUNCT
fuelectenerg-900	770	5	2004	2004	NUM
fuelectenerg-900	770	6	.	.	PUNCT
fuelectenerg-900	771	1	[	[	X
fuelectenerg-900	771	2	42	42	NUM
fuelectenerg-900	771	3	]	]	PUNCT
fuelectenerg-900	771	4	k.	k.	PROPN
fuelectenerg-900	771	5	sundaresan	sundaresan	PROPN
fuelectenerg-900	771	6	,	,	PUNCT
fuelectenerg-900	771	7	g.	g.	PROPN
fuelectenerg-900	771	8	k.	k.	PROPN
fuelectenerg-900	771	9	ho	ho	PROPN
fuelectenerg-900	771	10	,	,	PUNCT
fuelectenerg-900	771	11	s.	s.	PROPN
fuelectenerg-900	771	12	pourkamali	pourkamali	PROPN
fuelectenerg-900	771	13	and	and	CCONJ
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fuelectenerg-900	771	15	ayazi	ayazi	PROPN
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fuelectenerg-900	771	17	"	"	PUNCT
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fuelectenerg-900	771	19	temperature	temperature	NOUN
fuelectenerg-900	771	20	compensated	compensate	VERB
fuelectenerg-900	771	21	silicon	silicon	NOUN
fuelectenerg-900	771	22	bulk	bulk	ADJ
fuelectenerg-900	771	23	acoustic	acoustic	ADJ
fuelectenerg-900	771	24	resonator	resonator	NOUN
fuelectenerg-900	771	25	reference	reference	NOUN
fuelectenerg-900	771	26	oscillators	oscillator	NOUN
fuelectenerg-900	771	27	"	"	PUNCT
fuelectenerg-900	771	28	,	,	PUNCT
fuelectenerg-900	771	29	ieee	ieee	PROPN
fuelectenerg-900	771	30	j.	j.	PROPN
fuelectenerg-900	771	31	solid	solid	PROPN
fuelectenerg-900	771	32	-	-	PUNCT
fuelectenerg-900	771	33	state	state	NOUN
fuelectenerg-900	771	34	circuits	circuit	NOUN
fuelectenerg-900	771	35	,	,	PUNCT
fuelectenerg-900	771	36	vol	vol	NOUN
fuelectenerg-900	771	37	.	.	PROPN
fuelectenerg-900	771	38	42	42	NUM
fuelectenerg-900	771	39	,	,	PUNCT
fuelectenerg-900	771	40	pp	pp	ADJ
fuelectenerg-900	771	41	.	.	PUNCT
fuelectenerg-900	771	42	1425–1434	1425–1434	NUM
fuelectenerg-900	771	43	,	,	PUNCT
fuelectenerg-900	771	44	2007	2007	NUM
fuelectenerg-900	771	45	.	.	PUNCT
fuelectenerg-900	772	1	[	[	X
fuelectenerg-900	772	2	43	43	NUM
fuelectenerg-900	772	3	]	]	X
fuelectenerg-900	772	4	j.	j.	PROPN
fuelectenerg-900	772	5	salvia	salvia	PROPN
fuelectenerg-900	772	6	,	,	PUNCT
fuelectenerg-900	772	7	m.	m.	NOUN
fuelectenerg-900	772	8	messana	messana	PROPN
fuelectenerg-900	772	9	,	,	PUNCT
fuelectenerg-900	772	10	m.	m.	NOUN
fuelectenerg-900	772	11	ohline	ohline	PROPN
fuelectenerg-900	772	12	,	,	PUNCT
fuelectenerg-900	772	13	m.	m.	NOUN
fuelectenerg-900	772	14	a.	a.	PROPN
fuelectenerg-900	772	15	hopcroft	hopcroft	ADV
fuelectenerg-900	772	16	,	,	PUNCT
fuelectenerg-900	772	17	r.	r.	PROPN
fuelectenerg-900	772	18	melamud	melamud	PROPN
fuelectenerg-900	772	19	,	,	PUNCT
fuelectenerg-900	772	20	s.	s.	PROPN
fuelectenerg-900	772	21	chandorkar	chandorkar	PROPN
fuelectenerg-900	772	22	,	,	PUNCT
fuelectenerg-900	772	23	h.	h.	PROPN
fuelectenerg-900	772	24	k.	k.	PROPN
fuelectenerg-900	772	25	lee	lee	PROPN
fuelectenerg-900	772	26	,	,	PUNCT
fuelectenerg-900	772	27	g.	g.	PROPN
fuelectenerg-900	772	28	bahl	bahl	PROPN
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fuelectenerg-900	772	30	b.	b.	PROPN
fuelectenerg-900	772	31	murmann	murmann	PROPN
fuelectenerg-900	772	32	and	and	CCONJ
fuelectenerg-900	772	33	t.	t.	PROPN
fuelectenerg-900	772	34	w.	w.	PROPN
fuelectenerg-900	772	35	kenny	kenny	PROPN
fuelectenerg-900	772	36	,	,	PUNCT
fuelectenerg-900	772	37	"	"	PUNCT
fuelectenerg-900	772	38	exploring	explore	VERB
fuelectenerg-900	772	39	the	the	DET
fuelectenerg-900	772	40	limits	limit	NOUN
fuelectenerg-900	772	41	and	and	CCONJ
fuelectenerg-900	772	42	practicality	practicality	NOUN
fuelectenerg-900	772	43	of	of	ADP
fuelectenerg-900	772	44	q	q	NOUN
fuelectenerg-900	772	45	-	-	PUNCT
fuelectenerg-900	772	46	based	base	VERB
fuelectenerg-900	772	47	temperature	temperature	NOUN
fuelectenerg-900	772	48	compensation	compensation	NOUN
fuelectenerg-900	772	49	for	for	ADP
fuelectenerg-900	772	50	silicon	silicon	NOUN
fuelectenerg-900	772	51	resonators	resonator	NOUN
fuelectenerg-900	772	52	"	"	PUNCT
fuelectenerg-900	772	53	,	,	PUNCT
fuelectenerg-900	772	54	in	in	ADP
fuelectenerg-900	772	55	proceedings	proceeding	NOUN
fuelectenerg-900	772	56	of	of	ADP
fuelectenerg-900	772	57	international	international	ADJ
fuelectenerg-900	772	58	electron	electron	NOUN
fuelectenerg-900	772	59	devices	device	NOUN
fuelectenerg-900	772	60	meeting	meeting	NOUN
fuelectenerg-900	772	61	,	,	PUNCT
fuelectenerg-900	772	62	san	san	PROPN
fuelectenerg-900	772	63	francisco	francisco	PROPN
fuelectenerg-900	772	64	,	,	PUNCT
fuelectenerg-900	772	65	ca	ca	NOUN
fuelectenerg-900	772	66	,	,	PUNCT
fuelectenerg-900	772	67	2008	2008	NUM
fuelectenerg-900	772	68	,	,	PUNCT
fuelectenerg-900	772	69	pp	pp	ADJ
fuelectenerg-900	772	70	.	.	PUNCT
fuelectenerg-900	773	1	1	1	NUM
fuelectenerg-900	773	2	-	-	SYM
fuelectenerg-900	773	3	4	4	NUM
fuelectenerg-900	773	4	.	.	NOUN
fuelectenerg-900	773	5	378	378	NUM
fuelectenerg-900	773	6	i.	i.	NOUN
fuelectenerg-900	773	7	jokić	jokić	PROPN
fuelectenerg-900	773	8	,	,	PUNCT
fuelectenerg-900	773	9	m.	m.	NOUN
fuelectenerg-900	773	10	frantlović	frantlović	NOUN
fuelectenerg-900	773	11	,	,	PUNCT
fuelectenerg-900	773	12	z.	z.	PROPN
fuelectenerg-900	773	13	djurić	djurić	PROPN
fuelectenerg-900	773	14	,	,	PUNCT
fuelectenerg-900	773	15	m.	m.	NOUN
fuelectenerg-900	773	16	l.	l.	PROPN
fuelectenerg-900	773	17	dukić	dukić	PROPN
fuelectenerg-900	774	1	[	[	X
fuelectenerg-900	774	2	44	44	NUM
fuelectenerg-900	774	3	]	]	PUNCT
fuelectenerg-900	774	4	w.-t	w.-t	NOUN
fuelectenerg-900	774	5	.	.	PUNCT
fuelectenerg-900	775	1	hsu	hsu	PROPN
fuelectenerg-900	775	2	and	and	CCONJ
fuelectenerg-900	775	3	c.	c.	PROPN
fuelectenerg-900	775	4	t.-c	t.-c	PROPN
fuelectenerg-900	775	5	.	.	PUNCT
fuelectenerg-900	776	1	nguyen	nguyen	NOUN
fuelectenerg-900	776	2	,	,	PUNCT
fuelectenerg-900	776	3	"	"	PUNCT
fuelectenerg-900	776	4	stiffness	stiffness	NOUN
fuelectenerg-900	776	5	-	-	PUNCT
fuelectenerg-900	776	6	compensated	compensate	VERB
fuelectenerg-900	776	7	temperature	temperature	NOUN
fuelectenerg-900	776	8	insensitive	insensitive	ADJ
fuelectenerg-900	776	9	micro	micro	ADJ
fuelectenerg-900	776	10	-	-	ADJ
fuelectenerg-900	776	11	mechanical	mechanical	ADJ
fuelectenerg-900	776	12	resonators	resonator	NOUN
fuelectenerg-900	776	13	"	"	PUNCT
fuelectenerg-900	776	14	,	,	PUNCT
fuelectenerg-900	776	15	in	in	ADP
fuelectenerg-900	776	16	proceedings	proceeding	NOUN
fuelectenerg-900	776	17	of	of	ADP
fuelectenerg-900	776	18	ieee	ieee	PROPN
fuelectenerg-900	776	19	international	international	PROPN
fuelectenerg-900	776	20	micro	micro	PROPN
fuelectenerg-900	776	21	electro	electro	PROPN
fuelectenerg-900	776	22	mechanical	mechanical	ADJ
fuelectenerg-900	776	23	systems	system	NOUN
fuelectenerg-900	776	24	conference	conference	NOUN
fuelectenerg-900	776	25	,	,	PUNCT
fuelectenerg-900	776	26	las	las	PROPN
fuelectenerg-900	776	27	vegas	vegas	PROPN
fuelectenerg-900	776	28	,	,	PUNCT
fuelectenerg-900	776	29	nevada	nevada	PROPN
fuelectenerg-900	776	30	,	,	PUNCT
fuelectenerg-900	776	31	2002	2002	NUM
fuelectenerg-900	776	32	,	,	PUNCT
fuelectenerg-900	776	33	pp	pp	ADV
fuelectenerg-900	776	34	.	.	PUNCT
fuelectenerg-900	777	1	731–734	731–734	NUM
fuelectenerg-900	777	2	.	.	PUNCT
fuelectenerg-900	778	1	[	[	X
fuelectenerg-900	778	2	45	45	NUM
fuelectenerg-900	778	3	]	]	PUNCT
fuelectenerg-900	778	4	a.	a.	NOUN
fuelectenerg-900	778	5	k.	k.	PROPN
fuelectenerg-900	778	6	samarao	samarao	PROPN
fuelectenerg-900	778	7	and	and	CCONJ
fuelectenerg-900	778	8	f.	f.	PROPN
fuelectenerg-900	778	9	ayazi	ayazi	PROPN
fuelectenerg-900	778	10	,	,	PUNCT
fuelectenerg-900	778	11	"	"	PUNCT
fuelectenerg-900	778	12	temperature	temperature	NOUN
fuelectenerg-900	778	13	compensation	compensation	NOUN
fuelectenerg-900	778	14	of	of	ADP
fuelectenerg-900	778	15	silicon	silicon	NOUN
fuelectenerg-900	778	16	micromechanical	micromechanical	ADJ
fuelectenerg-900	778	17	resonators	resonator	NOUN
fuelectenerg-900	778	18	via	via	ADP
fuelectenerg-900	778	19	degenerate	degenerate	ADJ
fuelectenerg-900	778	20	doping	doping	NOUN
fuelectenerg-900	778	21	"	"	PUNCT
fuelectenerg-900	778	22	,	,	PUNCT
fuelectenerg-900	778	23	in	in	ADP
fuelectenerg-900	778	24	proceedings	proceeding	NOUN
fuelectenerg-900	778	25	of	of	ADP
fuelectenerg-900	778	26	ieee	ieee	PROPN
fuelectenerg-900	778	27	international	international	PROPN
fuelectenerg-900	778	28	electron	electron	NOUN
fuelectenerg-900	778	29	devices	device	NOUN
fuelectenerg-900	778	30	meeting	meeting	NOUN
fuelectenerg-900	778	31	.	.	PUNCT
fuelectenerg-900	779	1	baltimore	baltimore	PROPN
fuelectenerg-900	779	2	,	,	PUNCT
fuelectenerg-900	779	3	2009	2009	NUM
fuelectenerg-900	779	4	,	,	PUNCT
fuelectenerg-900	779	5	pp	pp	ADV
fuelectenerg-900	779	6	.	.	PUNCT
fuelectenerg-900	780	1	1–4	1–4	NUM
fuelectenerg-900	780	2	.	.	PUNCT
fuelectenerg-900	781	1	[	[	X
fuelectenerg-900	781	2	46	46	NUM
fuelectenerg-900	781	3	]	]	PUNCT
fuelectenerg-900	781	4	a.	a.	PROPN
fuelectenerg-900	781	5	k.	k.	PROPN
fuelectenerg-900	781	6	samarao	samarao	PROPN
fuelectenerg-900	781	7	,	,	PUNCT
fuelectenerg-900	781	8	g.	g.	PROPN
fuelectenerg-900	781	9	casinovi	casinovi	PROPN
fuelectenerg-900	781	10	and	and	CCONJ
fuelectenerg-900	781	11	f.	f.	PROPN
fuelectenerg-900	781	12	ayazi	ayazi	PROPN
fuelectenerg-900	781	13	,	,	PUNCT
fuelectenerg-900	781	14	"	"	PUNCT
fuelectenerg-900	781	15	passive	passive	ADJ
fuelectenerg-900	781	16	tcf	tcf	PROPN
fuelectenerg-900	781	17	compensation	compensation	PROPN
fuelectenerg-900	781	18	in	in	ADP
fuelectenerg-900	781	19	high	high	ADJ
fuelectenerg-900	781	20	q	q	ADJ
fuelectenerg-900	781	21	silicon	silicon	NOUN
fuelectenerg-900	781	22	micromechanical	micromechanical	ADJ
fuelectenerg-900	781	23	resonators	resonator	NOUN
fuelectenerg-900	781	24	"	"	PUNCT
fuelectenerg-900	781	25	,	,	PUNCT
fuelectenerg-900	781	26	in	in	ADP
fuelectenerg-900	781	27	proceedings	proceeding	NOUN
fuelectenerg-900	781	28	of	of	ADP
fuelectenerg-900	781	29	the	the	DET
fuelectenerg-900	781	30	23nd	23nd	ADJ
fuelectenerg-900	781	31	ieee	ieee	NOUN
fuelectenerg-900	781	32	international	international	ADJ
fuelectenerg-900	781	33	conference	conference	NOUN
fuelectenerg-900	781	34	on	on	ADP
fuelectenerg-900	781	35	microelectromechanical	microelectromechanical	ADJ
fuelectenerg-900	781	36	systems	system	NOUN
fuelectenerg-900	781	37	,	,	PUNCT
fuelectenerg-900	781	38	hong	hong	PROPN
fuelectenerg-900	781	39	kong	kong	PROPN
fuelectenerg-900	781	40	,	,	PUNCT
fuelectenerg-900	781	41	2010	2010	NUM
fuelectenerg-900	781	42	,	,	PUNCT
fuelectenerg-900	781	43	pp	pp	ADJ
fuelectenerg-900	781	44	.	.	PUNCT
fuelectenerg-900	782	1	116–119	116–119	NUM
fuelectenerg-900	782	2	.	.	PUNCT
fuelectenerg-900	783	1	[	[	X
fuelectenerg-900	783	2	47	47	NUM
fuelectenerg-900	783	3	]	]	X
fuelectenerg-900	783	4	r.	r.	PROPN
fuelectenerg-900	783	5	melamud	melamud	PROPN
fuelectenerg-900	783	6	,	,	PUNCT
fuelectenerg-900	783	7	s.	s.	PROPN
fuelectenerg-900	783	8	a.	a.	NOUN
fuelectenerg-900	783	9	chandorkar	chandorkar	PROPN
fuelectenerg-900	783	10	,	,	PUNCT
fuelectenerg-900	783	11	k.	k.	PROPN
fuelectenerg-900	783	12	bongsang	bongsang	PROPN
fuelectenerg-900	783	13	,	,	PUNCT
fuelectenerg-900	783	14	h.	h.	PROPN
fuelectenerg-900	783	15	k.	k.	PROPN
fuelectenerg-900	783	16	lee	lee	PROPN
fuelectenerg-900	783	17	,	,	PUNCT
fuelectenerg-900	783	18	j.	j.	PROPN
fuelectenerg-900	783	19	c.	c.	PROPN
fuelectenerg-900	783	20	salvia	salvia	PROPN
fuelectenerg-900	783	21	,	,	PUNCT
fuelectenerg-900	783	22	g.	g.	PROPN
fuelectenerg-900	783	23	bahl	bahl	PROPN
fuelectenerg-900	783	24	,	,	PUNCT
fuelectenerg-900	783	25	m.	m.	NOUN
fuelectenerg-900	783	26	a.	a.	NOUN
fuelectenerg-900	783	27	hopcroft	hopcroft	ADV
fuelectenerg-900	783	28	and	and	CCONJ
fuelectenerg-900	783	29	t.	t.	PROPN
fuelectenerg-900	783	30	w.	w.	PROPN
fuelectenerg-900	783	31	kenny	kenny	PROPN
fuelectenerg-900	783	32	,	,	PUNCT
fuelectenerg-900	783	33	"	"	PUNCT
fuelectenerg-900	783	34	temperature	temperature	NOUN
fuelectenerg-900	783	35	insensitive	insensitive	ADJ
fuelectenerg-900	783	36	composite	composite	ADJ
fuelectenerg-900	783	37	micromechanical	micromechanical	ADJ
fuelectenerg-900	783	38	resonators	resonator	NOUN
fuelectenerg-900	783	39	"	"	PUNCT
fuelectenerg-900	783	40	,	,	PUNCT
fuelectenerg-900	783	41	j.	j.	PROPN
fuelectenerg-900	783	42	microelectromechanical	microelectromechanical	ADJ
fuelectenerg-900	783	43	systems	system	NOUN
fuelectenerg-900	783	44	,	,	PUNCT
fuelectenerg-900	783	45	vol	vol	NOUN
fuelectenerg-900	783	46	.	.	PROPN
fuelectenerg-900	783	47	18	18	NUM
fuelectenerg-900	783	48	,	,	PUNCT
fuelectenerg-900	783	49	pp	pp	ADJ
fuelectenerg-900	783	50	.	.	PUNCT
fuelectenerg-900	784	1	1409–1419	1409–1419	NUM
fuelectenerg-900	784	2	,	,	PUNCT
fuelectenerg-900	784	3	2009	2009	NUM
fuelectenerg-900	784	4	.	.	PUNCT
fuelectenerg-900	785	1	[	[	X
fuelectenerg-900	785	2	48	48	NUM
fuelectenerg-900	785	3	]	]	PUNCT
fuelectenerg-900	785	4	h.	h.	PROPN
fuelectenerg-900	785	5	k.	k.	PROPN
fuelectenerg-900	785	6	lee	lee	PROPN
fuelectenerg-900	785	7	,	,	PUNCT
fuelectenerg-900	785	8	m.	m.	NOUN
fuelectenerg-900	785	9	a.	a.	PROPN
fuelectenerg-900	785	10	hopcroft	hopcroft	ADV
fuelectenerg-900	785	11	,	,	PUNCT
fuelectenerg-900	785	12	r.	r.	PROPN
fuelectenerg-900	785	13	k.	k.	PROPN
fuelectenerg-900	785	14	melamud	melamud	PROPN
fuelectenerg-900	785	15	,	,	PUNCT
fuelectenerg-900	785	16	b.	b.	PROPN
fuelectenerg-900	785	17	kim	kim	PROPN
fuelectenerg-900	785	18	,	,	PUNCT
fuelectenerg-900	785	19	j.	j.	PROPN
fuelectenerg-900	785	20	salvia	salvia	PROPN
fuelectenerg-900	785	21	,	,	PUNCT
fuelectenerg-900	785	22	s.	s.	PROPN
fuelectenerg-900	785	23	chandorkar	chandorkar	PROPN
fuelectenerg-900	785	24	,	,	PUNCT
fuelectenerg-900	785	25	ž	ž	PROPN
fuelectenerg-900	785	26	and	and	CCONJ
fuelectenerg-900	785	27	t.	t.	PROPN
fuelectenerg-900	785	28	w.	w.	PROPN
fuelectenerg-900	785	29	kenny	kenny	PROPN
fuelectenerg-900	785	30	,	,	PUNCT
fuelectenerg-900	785	31	"	"	PUNCT
fuelectenerg-900	785	32	electrostatic	electrostatic	ADJ
fuelectenerg-900	785	33	tuning	tuning	NOUN
fuelectenerg-900	785	34	of	of	ADP
fuelectenerg-900	785	35	hermetically	hermetically	NOUN
fuelectenerg-900	785	36	encapsulated	encapsulate	VERB
fuelectenerg-900	785	37	composite	composite	ADJ
fuelectenerg-900	785	38	resonators	resonator	NOUN
fuelectenerg-900	785	39	"	"	PUNCT
fuelectenerg-900	785	40	,	,	PUNCT
fuelectenerg-900	785	41	in	in	ADP
fuelectenerg-900	785	42	proceedings	proceeding	NOUN
fuelectenerg-900	785	43	of	of	ADP
fuelectenerg-900	785	44	ieee	ieee	PROPN
fuelectenerg-900	785	45	solid	solid	ADJ
fuelectenerg-900	785	46	state	state	NOUN
fuelectenerg-900	785	47	sensor	sensor	NOUN
fuelectenerg-900	785	48	,	,	PUNCT
fuelectenerg-900	785	49	actuator	actuator	NOUN
fuelectenerg-900	785	50	and	and	CCONJ
fuelectenerg-900	785	51	microsystems	microsystem	NOUN
fuelectenerg-900	785	52	workshop	workshop	NOUN
fuelectenerg-900	785	53	,	,	PUNCT
fuelectenerg-900	785	54	hilton	hilton	PROPN
fuelectenerg-900	785	55	head	head	NOUN
fuelectenerg-900	785	56	,	,	PUNCT
fuelectenerg-900	785	57	2008	2008	NUM
fuelectenerg-900	785	58	,	,	PUNCT
fuelectenerg-900	785	59	pp	pp	ADJ
fuelectenerg-900	785	60	.	.	PUNCT
fuelectenerg-900	786	1	48–51	48–51	NUM
fuelectenerg-900	786	2	.	.	PUNCT
fuelectenerg-900	787	1	[	[	X
fuelectenerg-900	787	2	49	49	NUM
fuelectenerg-900	787	3	]	]	PUNCT
fuelectenerg-900	787	4	j.	j.	PROPN
fuelectenerg-900	787	5	h.	h.	PROPN
fuelectenerg-900	787	6	seo	seo	PROPN
fuelectenerg-900	787	7	,	,	PUNCT
fuelectenerg-900	787	8	k.	k.	PROPN
fuelectenerg-900	787	9	s.	s.	PROPN
fuelectenerg-900	787	10	demirci	demirci	PROPN
fuelectenerg-900	787	11	,	,	PUNCT
fuelectenerg-900	787	12	a.	a.	NOUN
fuelectenerg-900	787	13	byun	byun	PROPN
fuelectenerg-900	787	14	,	,	PUNCT
fuelectenerg-900	787	15	s.	s.	PROPN
fuelectenerg-900	787	16	truax	truax	PROPN
fuelectenerg-900	787	17	and	and	CCONJ
fuelectenerg-900	787	18	o.	o.	PROPN
fuelectenerg-900	787	19	brand	brand	PROPN
fuelectenerg-900	787	20	,	,	PUNCT
fuelectenerg-900	787	21	"	"	PUNCT
fuelectenerg-900	787	22	novel	novel	ADJ
fuelectenerg-900	787	23	temperature	temperature	NOUN
fuelectenerg-900	787	24	compensation	compensation	NOUN
fuelectenerg-900	787	25	scheme	scheme	NOUN
fuelectenerg-900	787	26	for	for	ADP
fuelectenerg-900	787	27	microresonators	microresonator	NOUN
fuelectenerg-900	787	28	based	base	VERB
fuelectenerg-900	787	29	on	on	ADP
fuelectenerg-900	787	30	controlled	control	VERB
fuelectenerg-900	787	31	stiffness	stiffness	ADJ
fuelectenerg-900	787	32	modulation	modulation	NOUN
fuelectenerg-900	787	33	"	"	PUNCT
fuelectenerg-900	787	34	,	,	PUNCT
fuelectenerg-900	787	35	in	in	ADP
fuelectenerg-900	787	36	proceedings	proceeding	NOUN
fuelectenerg-900	787	37	of	of	ADP
fuelectenerg-900	787	38	international	international	ADJ
fuelectenerg-900	787	39	conference	conference	NOUN
fuelectenerg-900	787	40	on	on	ADP
fuelectenerg-900	787	41	solid	solid	ADJ
fuelectenerg-900	787	42	-	-	PUNCT
fuelectenerg-900	787	43	state	state	NOUN
fuelectenerg-900	787	44	sensors	sensor	NOUN
fuelectenerg-900	787	45	,	,	PUNCT
fuelectenerg-900	787	46	actuators	actuator	NOUN
fuelectenerg-900	787	47	and	and	CCONJ
fuelectenerg-900	787	48	microsystems	microsystem	NOUN
fuelectenerg-900	787	49	(	(	PUNCT
fuelectenerg-900	787	50	transducers	transducer	NOUN
fuelectenerg-900	787	51	2007	2007	NUM
fuelectenerg-900	787	52	)	)	PUNCT
fuelectenerg-900	787	53	,	,	PUNCT
fuelectenerg-900	787	54	2007	2007	NUM
fuelectenerg-900	787	55	,	,	PUNCT
fuelectenerg-900	787	56	pp	pp	ADJ
fuelectenerg-900	787	57	.	.	PUNCT
fuelectenerg-900	788	1	2457	2457	NUM
fuelectenerg-900	788	2	–	–	PUNCT
fuelectenerg-900	788	3	2360	2360	NUM
fuelectenerg-900	788	4	.	.	PUNCT
fuelectenerg-900	789	1	[	[	X
fuelectenerg-900	789	2	50	50	NUM
fuelectenerg-900	789	3	]	]	PUNCT
fuelectenerg-900	789	4	h.	h.	PROPN
fuelectenerg-900	789	5	wan	wan	PROPN
fuelectenerg-900	789	6	-	-	PROPN
fuelectenerg-900	789	7	thai	thai	PROPN
fuelectenerg-900	789	8	,	,	PUNCT
fuelectenerg-900	789	9	j.	j.	PROPN
fuelectenerg-900	789	10	r.	r.	PROPN
fuelectenerg-900	789	11	clark	clark	PROPN
fuelectenerg-900	789	12	and	and	CCONJ
fuelectenerg-900	789	13	c.	c.	PROPN
fuelectenerg-900	789	14	nguyen	nguyen	PROPN
fuelectenerg-900	789	15	,	,	PUNCT
fuelectenerg-900	789	16	"	"	PUNCT
fuelectenerg-900	789	17	mechanically	mechanically	ADV
fuelectenerg-900	789	18	temperature	temperature	NOUN
fuelectenerg-900	789	19	-	-	PUNCT
fuelectenerg-900	789	20	compensated	compensate	VERB
fuelectenerg-900	789	21	flexural	flexural	ADJ
fuelectenerg-900	789	22	-	-	PUNCT
fuelectenerg-900	789	23	mode	mode	NOUN
fuelectenerg-900	789	24	micromechanical	micromechanical	ADJ
fuelectenerg-900	789	25	resonators	resonator	NOUN
fuelectenerg-900	789	26	"	"	PUNCT
fuelectenerg-900	789	27	,	,	PUNCT
fuelectenerg-900	789	28	in	in	ADP
fuelectenerg-900	789	29	proceedings	proceeding	NOUN
fuelectenerg-900	789	30	of	of	ADP
fuelectenerg-900	789	31	ieee	ieee	PROPN
fuelectenerg-900	789	32	international	international	PROPN
fuelectenerg-900	789	33	electron	electron	NOUN
fuelectenerg-900	789	34	devices	device	NOUN
fuelectenerg-900	789	35	meeting	meeting	NOUN
fuelectenerg-900	789	36	,	,	PUNCT
fuelectenerg-900	789	37	san	san	PROPN
fuelectenerg-900	789	38	francisco	francisco	PROPN
fuelectenerg-900	789	39	,	,	PUNCT
fuelectenerg-900	789	40	ca	ca	NOUN
fuelectenerg-900	789	41	,	,	PUNCT
fuelectenerg-900	789	42	2000	2000	NUM
fuelectenerg-900	789	43	,	,	PUNCT
fuelectenerg-900	789	44	pp	pp	ADJ
fuelectenerg-900	789	45	.	.	PUNCT
fuelectenerg-900	790	1	399	399	NUM
fuelectenerg-900	790	2	-	-	SYM
fuelectenerg-900	790	3	402	402	NUM
fuelectenerg-900	790	4	.	.	PUNCT
fuelectenerg-900	791	1	[	[	X
fuelectenerg-900	791	2	51	51	NUM
fuelectenerg-900	791	3	]	]	PUNCT
fuelectenerg-900	791	4	f.	f.	PROPN
fuelectenerg-900	791	5	nabki	nabki	PROPN
fuelectenerg-900	791	6	,	,	PUNCT
fuelectenerg-900	791	7	t.	t.	PROPN
fuelectenerg-900	791	8	a.	a.	NOUN
fuelectenerg-900	791	9	dusatko	dusatko	PROPN
fuelectenerg-900	791	10	and	and	CCONJ
fuelectenerg-900	791	11	m.	m.	PROPN
fuelectenerg-900	791	12	n.	n.	PROPN
fuelectenerg-900	791	13	el	el	PROPN
fuelectenerg-900	791	14	-	-	PROPN
fuelectenerg-900	791	15	gamal	gamal	PROPN
fuelectenerg-900	791	16	,	,	PUNCT
fuelectenerg-900	791	17	"	"	PUNCT
fuelectenerg-900	791	18	frequency	frequency	ADJ
fuelectenerg-900	791	19	tunable	tunable	ADJ
fuelectenerg-900	791	20	silicon	silicon	NOUN
fuelectenerg-900	791	21	carbide	carbide	NOUN
fuelectenerg-900	791	22	resonators	resonator	NOUN
fuelectenerg-900	791	23	for	for	ADP
fuelectenerg-900	791	24	mems	mem	NOUN
fuelectenerg-900	791	25	above	above	ADP
fuelectenerg-900	791	26	ic	ic	PROPN
fuelectenerg-900	791	27	"	"	PUNCT
fuelectenerg-900	791	28	,	,	PUNCT
fuelectenerg-900	791	29	in	in	ADP
fuelectenerg-900	791	30	proceedings	proceeding	NOUN
fuelectenerg-900	791	31	of	of	ADP
fuelectenerg-900	791	32	ieee	ieee	NOUN
fuelectenerg-900	791	33	custom	custom	NOUN
fuelectenerg-900	791	34	integrated	integrate	VERB
fuelectenerg-900	791	35	circuits	circuit	NOUN
fuelectenerg-900	791	36	conference	conference	NOUN
fuelectenerg-900	791	37	,	,	PUNCT
fuelectenerg-900	791	38	san	san	PROPN
fuelectenerg-900	791	39	jose	jose	PROPN
fuelectenerg-900	791	40	,	,	PUNCT
fuelectenerg-900	791	41	ca	ca	NOUN
fuelectenerg-900	791	42	,	,	PUNCT
fuelectenerg-900	791	43	2008	2008	NUM
fuelectenerg-900	791	44	,	,	PUNCT
fuelectenerg-900	791	45	pp	pp	ADJ
fuelectenerg-900	791	46	.	.	PUNCT
fuelectenerg-900	792	1	185	185	NUM
fuelectenerg-900	792	2	-	-	SYM
fuelectenerg-900	792	3	188	188	NUM
fuelectenerg-900	792	4	.	.	PUNCT
fuelectenerg-900	793	1	[	[	X
fuelectenerg-900	793	2	52	52	NUM
fuelectenerg-900	793	3	]	]	PUNCT
fuelectenerg-900	793	4	w.	w.	PROPN
fuelectenerg-900	793	5	pang	pang	PROPN
fuelectenerg-900	793	6	,	,	PUNCT
fuelectenerg-900	793	7	h.	h.	PROPN
fuelectenerg-900	793	8	zhang	zhang	PROPN
fuelectenerg-900	793	9	,	,	PUNCT
fuelectenerg-900	793	10	h.	h.	PROPN
fuelectenerg-900	793	11	yu	yu	PROPN
fuelectenerg-900	793	12	,	,	PUNCT
fuelectenerg-900	793	13	c.-y	c.-y	NOUN
fuelectenerg-900	793	14	.	.	PUNCT
fuelectenerg-900	794	1	lee	lee	PROPN
fuelectenerg-900	794	2	and	and	CCONJ
fuelectenerg-900	794	3	e.	e.	PROPN
fuelectenerg-900	794	4	s.	s.	PROPN
fuelectenerg-900	794	5	kim	kim	PROPN
fuelectenerg-900	794	6	,	,	PUNCT
fuelectenerg-900	794	7	"	"	PUNCT
fuelectenerg-900	794	8	electrical	electrical	ADJ
fuelectenerg-900	794	9	frequency	frequency	NOUN
fuelectenerg-900	794	10	tuning	tuning	NOUN
fuelectenerg-900	794	11	of	of	ADP
fuelectenerg-900	794	12	film	film	NOUN
fuelectenerg-900	794	13	bulk	bulk	ADJ
fuelectenerg-900	794	14	acoustic	acoustic	ADJ
fuelectenerg-900	794	15	resonator	resonator	NOUN
fuelectenerg-900	794	16	"	"	PUNCT
fuelectenerg-900	794	17	,	,	PUNCT
fuelectenerg-900	794	18	j.	j.	PROPN
fuelectenerg-900	794	19	microelectromechanical	microelectromechanical	ADJ
fuelectenerg-900	794	20	systems	system	NOUN
fuelectenerg-900	794	21	,	,	PUNCT
fuelectenerg-900	794	22	vol	vol	NOUN
fuelectenerg-900	794	23	.	.	PROPN
fuelectenerg-900	794	24	16	16	NUM
fuelectenerg-900	794	25	,	,	PUNCT
fuelectenerg-900	794	26	pp	pp	ADJ
fuelectenerg-900	794	27	.	.	PUNCT
fuelectenerg-900	795	1	1303	1303	NUM
fuelectenerg-900	795	2	-	-	SYM
fuelectenerg-900	795	3	1313	1313	NUM
fuelectenerg-900	795	4	,	,	PUNCT
fuelectenerg-900	795	5	2007	2007	NUM
fuelectenerg-900	795	6	.	.	PUNCT
fuelectenerg-900	796	1	[	[	X
fuelectenerg-900	796	2	53	53	NUM
fuelectenerg-900	796	3	]	]	PUNCT
fuelectenerg-900	796	4	m.	m.	NOUN
fuelectenerg-900	796	5	lutz	lutz	PROPN
fuelectenerg-900	796	6	,	,	PUNCT
fuelectenerg-900	796	7	a.	a.	NOUN
fuelectenerg-900	796	8	partridge	partridge	NOUN
fuelectenerg-900	796	9	and	and	CCONJ
fuelectenerg-900	796	10	p.	p.	PROPN
fuelectenerg-900	796	11	gupta	gupta	PROPN
fuelectenerg-900	796	12	,	,	PUNCT
fuelectenerg-900	796	13	n.	n.	PROPN
fuelectenerg-900	796	14	buchan	buchan	PROPN
fuelectenerg-900	796	15	,	,	PUNCT
fuelectenerg-900	796	16	e.	e.	PROPN
fuelectenerg-900	796	17	klaassen	klaassen	PROPN
fuelectenerg-900	796	18	,	,	PUNCT
fuelectenerg-900	796	19	j.	j.	PROPN
fuelectenerg-900	796	20	mcdonald	mcdonald	PROPN
fuelectenerg-900	796	21	and	and	CCONJ
fuelectenerg-900	796	22	k.	k.	PROPN
fuelectenerg-900	796	23	petersen	petersen	PROPN
fuelectenerg-900	796	24	,	,	PUNCT
fuelectenerg-900	796	25	"	"	PUNCT
fuelectenerg-900	796	26	mems	mem	VERB
fuelectenerg-900	796	27	oscillators	oscillator	NOUN
fuelectenerg-900	796	28	for	for	ADP
fuelectenerg-900	796	29	high	high	ADJ
fuelectenerg-900	796	30	volume	volume	NOUN
fuelectenerg-900	796	31	commercial	commercial	ADJ
fuelectenerg-900	796	32	applications	application	NOUN
fuelectenerg-900	796	33	"	"	PUNCT
fuelectenerg-900	796	34	,	,	PUNCT
fuelectenerg-900	796	35	in	in	ADP
fuelectenerg-900	796	36	proceedings	proceeding	NOUN
fuelectenerg-900	796	37	of	of	ADP
fuelectenerg-900	796	38	the	the	DET
fuelectenerg-900	796	39	14th	14th	ADJ
fuelectenerg-900	796	40	ieee	ieee	NOUN
fuelectenerg-900	796	41	international	international	ADJ
fuelectenerg-900	796	42	conference	conference	NOUN
fuelectenerg-900	796	43	on	on	ADP
fuelectenerg-900	796	44	solid	solid	ADJ
fuelectenerg-900	796	45	state	state	NOUN
fuelectenerg-900	796	46	sensors	sensor	NOUN
fuelectenerg-900	796	47	,	,	PUNCT
fuelectenerg-900	796	48	actuators	actuator	NOUN
fuelectenerg-900	796	49	and	and	CCONJ
fuelectenerg-900	796	50	microsystems	microsystem	NOUN
fuelectenerg-900	796	51	,	,	PUNCT
fuelectenerg-900	796	52	2007	2007	NUM
fuelectenerg-900	796	53	,	,	PUNCT
fuelectenerg-900	796	54	pp	pp	ADJ
fuelectenerg-900	796	55	.	.	PUNCT
fuelectenerg-900	797	1	49–52	49–52	NUM
fuelectenerg-900	797	2	.	.	PUNCT
fuelectenerg-900	798	1	[	[	X
fuelectenerg-900	798	2	54	54	NUM
fuelectenerg-900	798	3	]	]	PUNCT
fuelectenerg-900	798	4	w.	w.	PROPN
fuelectenerg-900	798	5	t.	t.	PROPN
fuelectenerg-900	798	6	hsu	hsu	PROPN
fuelectenerg-900	798	7	,	,	PUNCT
fuelectenerg-900	798	8	"	"	PUNCT
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fuelectenerg-900	798	10	of	of	ADP
fuelectenerg-900	798	11	silicon	silicon	NOUN
fuelectenerg-900	798	12	resonator	resonator	NOUN
fuelectenerg-900	798	13	oscillators	oscillator	NOUN
fuelectenerg-900	798	14	"	"	PUNCT
fuelectenerg-900	798	15	,	,	PUNCT
fuelectenerg-900	798	16	in	in	ADP
fuelectenerg-900	798	17	proceedings	proceeding	NOUN
fuelectenerg-900	798	18	of	of	ADP
fuelectenerg-900	798	19	ieee	ieee	PROPN
fuelectenerg-900	798	20	international	international	ADJ
fuelectenerg-900	798	21	frequency	frequency	NOUN
fuelectenerg-900	798	22	control	control	NOUN
fuelectenerg-900	798	23	symposium	symposium	NOUN
fuelectenerg-900	798	24	and	and	CCONJ
fuelectenerg-900	798	25	exposition	exposition	NOUN
fuelectenerg-900	798	26	,	,	PUNCT
fuelectenerg-900	798	27	miami	miami	PROPN
fuelectenerg-900	798	28	,	,	PUNCT
fuelectenerg-900	798	29	fl	fl	PROPN
fuelectenerg-900	798	30	,	,	PUNCT
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fuelectenerg-900	798	32	,	,	PUNCT
fuelectenerg-900	798	33	pp	pp	ADV
fuelectenerg-900	798	34	.	.	PUNCT
fuelectenerg-900	799	1	389–392	389–392	NUM
fuelectenerg-900	799	2	.	.	PUNCT
fuelectenerg-900	800	1	[	[	X
fuelectenerg-900	800	2	55	55	NUM
fuelectenerg-900	800	3	]	]	PUNCT
fuelectenerg-900	800	4	m.	m.	NOUN
fuelectenerg-900	800	5	lutz	lutz	PROPN
fuelectenerg-900	800	6	,	,	PUNCT
fuelectenerg-900	800	7	j.	j.	PROPN
fuelectenerg-900	800	8	mcdonald	mcdonald	PROPN
fuelectenerg-900	800	9	,	,	PUNCT
fuelectenerg-900	800	10	p.	p.	PROPN
fuelectenerg-900	800	11	gupta	gupta	PROPN
fuelectenerg-900	800	12	,	,	PUNCT
fuelectenerg-900	800	13	a.	a.	NOUN
fuelectenerg-900	800	14	partridge	partridge	NOUN
fuelectenerg-900	800	15	,	,	PUNCT
fuelectenerg-900	800	16	c.	c.	PROPN
fuelectenerg-900	800	17	dimpel	dimpel	PROPN
fuelectenerg-900	800	18	and	and	CCONJ
fuelectenerg-900	800	19	k.	k.	PROPN
fuelectenerg-900	800	20	petersen	petersen	PROPN
fuelectenerg-900	800	21	,	,	PUNCT
fuelectenerg-900	800	22	"	"	PUNCT
fuelectenerg-900	800	23	new	new	ADJ
fuelectenerg-900	800	24	mems	mem	NOUN
fuelectenerg-900	800	25	timing	timing	NOUN
fuelectenerg-900	800	26	references	reference	NOUN
fuelectenerg-900	800	27	for	for	ADP
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fuelectenerg-900	800	30	"	"	PUNCT
fuelectenerg-900	800	31	,	,	PUNCT
fuelectenerg-900	800	32	in	in	ADP
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fuelectenerg-900	800	35	for	for	ADP
fuelectenerg-900	800	36	automotive	automotive	ADJ
fuelectenerg-900	800	37	applications	application	NOUN
fuelectenerg-900	800	38	,	,	PUNCT
fuelectenerg-900	800	39	j.	j.	PROPN
fuelectenerg-900	800	40	valldorf	valldorf	PROPN
fuelectenerg-900	800	41	,	,	PUNCT
fuelectenerg-900	800	42	w.	w.	PROPN
fuelectenerg-900	800	43	gessner	gessner	PROPN
fuelectenerg-900	800	44	,	,	PUNCT
fuelectenerg-900	800	45	eds	eds	PROPN
fuelectenerg-900	800	46	.	.	PROPN
fuelectenerg-900	800	47	,	,	PUNCT
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fuelectenerg-900	800	49	:	:	PUNCT
fuelectenerg-900	800	50	springer	springer	NOUN
fuelectenerg-900	800	51	,	,	PUNCT
fuelectenerg-900	800	52	2007	2007	NUM
fuelectenerg-900	800	53	,	,	PUNCT
fuelectenerg-900	800	54	pp	pp	ADJ
fuelectenerg-900	800	55	.	.	PUNCT
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fuelectenerg-900	801	2	-	-	SYM
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fuelectenerg-900	801	4	.	.	PUNCT
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fuelectenerg-900	802	3	]	]	X
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fuelectenerg-900	802	7	,	,	PUNCT
fuelectenerg-900	802	8	s.	s.	PROPN
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fuelectenerg-900	802	13	and	and	CCONJ
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fuelectenerg-900	802	16	.	.	PUNCT
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fuelectenerg-900	803	2	,	,	PUNCT
fuelectenerg-900	803	3	"	"	PUNCT
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fuelectenerg-900	803	5	-	-	PUNCT
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fuelectenerg-900	803	8	resonator	resonator	NOUN
fuelectenerg-900	803	9	oscillator	oscillator	NOUN
fuelectenerg-900	803	10	"	"	PUNCT
fuelectenerg-900	803	11	,	,	PUNCT
fuelectenerg-900	803	12	in	in	ADP
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fuelectenerg-900	803	18	devices	device	NOUN
fuelectenerg-900	803	19	meeting	meeting	NOUN
fuelectenerg-900	803	20	,	,	PUNCT
fuelectenerg-900	803	21	washington	washington	PROPN
fuelectenerg-900	803	22	,	,	PUNCT
fuelectenerg-900	803	23	dc	dc	PROPN
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fuelectenerg-900	803	26	,	,	PUNCT
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fuelectenerg-900	803	28	.	.	PUNCT
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fuelectenerg-900	804	2	.	.	PUNCT
fuelectenerg-900	805	1	[	[	X
fuelectenerg-900	805	2	57	57	NUM
fuelectenerg-900	805	3	]	]	PUNCT
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fuelectenerg-900	805	6	,	,	PUNCT
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fuelectenerg-900	805	8	jaakkola	jaakkola	PROPN
fuelectenerg-900	805	9	,	,	PUNCT
fuelectenerg-900	805	10	j.	j.	PROPN
fuelectenerg-900	805	11	kiihamaki	kiihamaki	PROPN
fuelectenerg-900	805	12	,	,	PUNCT
fuelectenerg-900	805	13	j.	j.	PROPN
fuelectenerg-900	805	14	karttunen	karttunen	PROPN
fuelectenerg-900	805	15	,	,	PUNCT
fuelectenerg-900	805	16	t.	t.	PROPN
fuelectenerg-900	805	17	lamminmaki	lamminmaki	PROPN
fuelectenerg-900	805	18	,	,	PUNCT
fuelectenerg-900	805	19	p.	p.	PROPN
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fuelectenerg-900	805	21	,	,	PUNCT
fuelectenerg-900	805	22	a.	a.	NOUN
fuelectenerg-900	805	23	oja	oja	PROPN
fuelectenerg-900	805	24	,	,	PUNCT
fuelectenerg-900	805	25	h.	h.	PROPN
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fuelectenerg-900	805	27	,	,	PUNCT
fuelectenerg-900	805	28	h.	h.	PROPN
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fuelectenerg-900	805	30	and	and	CCONJ
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fuelectenerg-900	805	34	"	"	PUNCT
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fuelectenerg-900	805	39	"	"	PUNCT
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fuelectenerg-900	805	41	sens	sen	NOUN
fuelectenerg-900	805	42	.	.	PROPN
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fuelectenerg-900	805	44	a	a	PRON
fuelectenerg-900	805	45	,	,	PUNCT
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fuelectenerg-900	805	47	.	.	PROPN
fuelectenerg-900	806	1	97	97	NUM
fuelectenerg-900	806	2	-	-	SYM
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fuelectenerg-900	806	4	,	,	PUNCT
fuelectenerg-900	806	5	pp	pp	ADJ
fuelectenerg-900	806	6	.	.	PUNCT
fuelectenerg-900	807	1	497	497	NUM
fuelectenerg-900	807	2	-	-	SYM
fuelectenerg-900	807	3	502	502	NUM
fuelectenerg-900	807	4	,	,	PUNCT
fuelectenerg-900	807	5	2002	2002	NUM
fuelectenerg-900	807	6	.	.	PUNCT
fuelectenerg-900	808	1	[	[	X
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fuelectenerg-900	808	3	]	]	PUNCT
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fuelectenerg-900	808	12	,	,	PUNCT
fuelectenerg-900	808	13	a.	a.	NOUN
fuelectenerg-900	808	14	summanwar	summanwar	NOUN
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fuelectenerg-900	808	18	and	and	CCONJ
fuelectenerg-900	808	19	l.	l.	PROPN
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fuelectenerg-900	808	21	,	,	PUNCT
fuelectenerg-900	808	22	"	"	PUNCT
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fuelectenerg-900	808	26	-	-	PUNCT
fuelectenerg-900	808	27	mhz	mhz	NOUN
fuelectenerg-900	808	28	-	-	PUNCT
fuelectenerg-900	808	29	disk	disk	NOUN
fuelectenerg-900	808	30	resonators	resonator	NOUN
fuelectenerg-900	808	31	with	with	ADP
fuelectenerg-900	808	32	silicon	silicon	NOUN
fuelectenerg-900	808	33	passive	passive	ADJ
fuelectenerg-900	808	34	integration	integration	NOUN
fuelectenerg-900	808	35	technology	technology	NOUN
fuelectenerg-900	808	36	"	"	PUNCT
fuelectenerg-900	808	37	,	,	PUNCT
fuelectenerg-900	808	38	ieee	ieee	NOUN
fuelectenerg-900	808	39	electron	electron	NOUN
fuelectenerg-900	808	40	device	device	NOUN
fuelectenerg-900	808	41	lett	lett	PROPN
fuelectenerg-900	808	42	.	.	PUNCT
fuelectenerg-900	808	43	,	,	PUNCT
fuelectenerg-900	808	44	vol	vol	NOUN
fuelectenerg-900	808	45	.	.	PROPN
fuelectenerg-900	808	46	31	31	NUM
fuelectenerg-900	808	47	,	,	PUNCT
fuelectenerg-900	808	48	pp	pp	ADJ
fuelectenerg-900	808	49	.	.	PUNCT
fuelectenerg-900	808	50	23–25	23–25	NUM
fuelectenerg-900	808	51	,	,	PUNCT
fuelectenerg-900	808	52	2010	2010	NUM
fuelectenerg-900	808	53	.	.	PUNCT
fuelectenerg-900	809	1	[	[	X
fuelectenerg-900	809	2	59	59	NUM
fuelectenerg-900	809	3	]	]	PUNCT
fuelectenerg-900	809	4	h.	h.	PROPN
fuelectenerg-900	809	5	lavasani	lavasani	PROPN
fuelectenerg-900	809	6	,	,	PUNCT
fuelectenerg-900	809	7	a.	a.	PROPN
fuelectenerg-900	809	8	k.	k.	PROPN
fuelectenerg-900	809	9	samarao	samarao	PROPN
fuelectenerg-900	809	10	,	,	PUNCT
fuelectenerg-900	809	11	g.	g.	PROPN
fuelectenerg-900	809	12	casinovi	casinovi	PROPN
fuelectenerg-900	809	13	and	and	CCONJ
fuelectenerg-900	809	14	f.	f.	PROPN
fuelectenerg-900	809	15	ayazi	ayazi	PROPN
fuelectenerg-900	809	16	,	,	PUNCT
fuelectenerg-900	809	17	"	"	PUNCT
fuelectenerg-900	809	18	a	a	DET
fuelectenerg-900	809	19	145	145	NUM
fuelectenerg-900	809	20	mhz	mhz	NOUN
fuelectenerg-900	809	21	low	low	ADJ
fuelectenerg-900	809	22	phase	phase	NOUN
fuelectenerg-900	809	23	-	-	PUNCT
fuelectenerg-900	809	24	noise	noise	NOUN
fuelectenerg-900	809	25	capacitive	capacitive	ADJ
fuelectenerg-900	809	26	silicon	silicon	PROPN
fuelectenerg-900	809	27	micromechanical	micromechanical	ADJ
fuelectenerg-900	809	28	oscillator	oscillator	NOUN
fuelectenerg-900	809	29	"	"	PUNCT
fuelectenerg-900	809	30	,	,	PUNCT
fuelectenerg-900	809	31	in	in	ADP
fuelectenerg-900	809	32	proceedings	proceeding	NOUN
fuelectenerg-900	809	33	of	of	ADP
fuelectenerg-900	809	34	international	international	ADJ
fuelectenerg-900	809	35	electron	electron	NOUN
fuelectenerg-900	809	36	devices	device	NOUN
fuelectenerg-900	809	37	meeting	meeting	NOUN
fuelectenerg-900	809	38	,	,	PUNCT
fuelectenerg-900	809	39	san	san	PROPN
fuelectenerg-900	809	40	francisco	francisco	PROPN
fuelectenerg-900	809	41	,	,	PUNCT
fuelectenerg-900	809	42	ca	ca	NOUN
fuelectenerg-900	809	43	,	,	PUNCT
fuelectenerg-900	809	44	2008	2008	NUM
fuelectenerg-900	809	45	,	,	PUNCT
fuelectenerg-900	809	46	pp	pp	ADJ
fuelectenerg-900	809	47	.	.	PUNCT
fuelectenerg-900	810	1	675–678	675–678	NUM
fuelectenerg-900	810	2	.	.	PUNCT
fuelectenerg-900	811	1	[	[	X
fuelectenerg-900	811	2	60	60	NUM
fuelectenerg-900	811	3	]	]	PUNCT
fuelectenerg-900	811	4	p.	p.	NOUN
fuelectenerg-900	811	5	rantakari	rantakari	NOUN
fuelectenerg-900	811	6	,	,	PUNCT
fuelectenerg-900	811	7	v.	v.	ADP
fuelectenerg-900	811	8	kaajakari	kaajakari	PROPN
fuelectenerg-900	811	9	,	,	PUNCT
fuelectenerg-900	811	10	t.	t.	PROPN
fuelectenerg-900	811	11	mattila	mattila	PROPN
fuelectenerg-900	811	12	,	,	PUNCT
fuelectenerg-900	811	13	j.	j.	PROPN
fuelectenerg-900	811	14	kiihamoki	kiihamoki	PROPN
fuelectenerg-900	811	15	,	,	PUNCT
fuelectenerg-900	811	16	a.	a.	NOUN
fuelectenerg-900	811	17	oja	oja	PROPN
fuelectenerg-900	811	18	,	,	PUNCT
fuelectenerg-900	811	19	i.	i.	PROPN
fuelectenerg-900	811	20	tittonen	tittonen	PROPN
fuelectenerg-900	811	21	and	and	CCONJ
fuelectenerg-900	811	22	h.	h.	PROPN
fuelectenerg-900	811	23	seppa	seppa	PROPN
fuelectenerg-900	811	24	,	,	PUNCT
fuelectenerg-900	811	25	"	"	PUNCT
fuelectenerg-900	811	26	low	low	ADJ
fuelectenerg-900	811	27	noise	noise	NOUN
fuelectenerg-900	811	28	,	,	PUNCT
fuelectenerg-900	811	29	low	low	ADJ
fuelectenerg-900	811	30	power	power	NOUN
fuelectenerg-900	811	31	micromechanical	micromechanical	ADJ
fuelectenerg-900	811	32	oscillator	oscillator	NOUN
fuelectenerg-900	811	33	"	"	PUNCT
fuelectenerg-900	811	34	,	,	PUNCT
fuelectenerg-900	811	35	in	in	ADP
fuelectenerg-900	811	36	proceedings	proceeding	NOUN
fuelectenerg-900	811	37	of	of	ADP
fuelectenerg-900	811	38	the	the	DET
fuelectenerg-900	811	39	13th	13th	ADJ
fuelectenerg-900	811	40	international	international	ADJ
fuelectenerg-900	811	41	conference	conference	NOUN
fuelectenerg-900	811	42	on	on	ADP
fuelectenerg-900	811	43	solidstate	solidstate	PROPN
fuelectenerg-900	811	44	sensors	sensor	NOUN
fuelectenerg-900	811	45	,	,	PUNCT
fuelectenerg-900	811	46	actuators	actuator	NOUN
fuelectenerg-900	811	47	and	and	CCONJ
fuelectenerg-900	811	48	microsystems	microsystem	NOUN
fuelectenerg-900	811	49	(	(	PUNCT
fuelectenerg-900	811	50	transducers	transducer	NOUN
fuelectenerg-900	811	51	)	)	PUNCT
fuelectenerg-900	811	52	,	,	PUNCT
fuelectenerg-900	811	53	seoul	seoul	PROPN
fuelectenerg-900	811	54	,	,	PUNCT
fuelectenerg-900	811	55	2005	2005	NUM
fuelectenerg-900	811	56	,	,	PUNCT
fuelectenerg-900	811	57	vol	vol	NOUN
fuelectenerg-900	811	58	.	.	PROPN
fuelectenerg-900	811	59	2	2	NUM
fuelectenerg-900	811	60	,	,	PUNCT
fuelectenerg-900	811	61	pp	pp	ADJ
fuelectenerg-900	811	62	.	.	PUNCT
fuelectenerg-900	811	63	2135–2138	2135–2138	NUM
fuelectenerg-900	811	64	.	.	PUNCT
fuelectenerg-900	812	1	[	[	X
fuelectenerg-900	812	2	61	61	NUM
fuelectenerg-900	812	3	]	]	PUNCT
fuelectenerg-900	812	4	m.	m.	NOUN
fuelectenerg-900	812	5	akgul	akgul	PROPN
fuelectenerg-900	812	6	,	,	PUNCT
fuelectenerg-900	812	7	b.	b.	PROPN
fuelectenerg-900	812	8	kim	kim	PROPN
fuelectenerg-900	812	9	,	,	PUNCT
fuelectenerg-900	812	10	l.	l.	PROPN
fuelectenerg-900	812	11	w.	w.	PROPN
fuelectenerg-900	812	12	hung	hung	PROPN
fuelectenerg-900	812	13	,	,	PUNCT
fuelectenerg-900	812	14	y.	y.	PROPN
fuelectenerg-900	812	15	lin	lin	PROPN
fuelectenerg-900	812	16	,	,	PUNCT
fuelectenerg-900	812	17	w.-c	w.-c	PROPN
fuelectenerg-900	812	18	.	.	PUNCT
fuelectenerg-900	813	1	li	li	PROPN
fuelectenerg-900	813	2	,	,	PUNCT
fuelectenerg-900	813	3	w.-l	w.-l	PROPN
fuelectenerg-900	813	4	.	.	PUNCT
fuelectenerg-900	814	1	huang	huang	PROPN
fuelectenerg-900	814	2	,	,	PUNCT
fuelectenerg-900	814	3	i.	i.	PROPN
fuelectenerg-900	814	4	gurin	gurin	PROPN
fuelectenerg-900	814	5	,	,	PUNCT
fuelectenerg-900	814	6	a.	a.	NOUN
fuelectenerg-900	814	7	borna	borna	PROPN
fuelectenerg-900	814	8	and	and	CCONJ
fuelectenerg-900	814	9	c.	c.	PROPN
fuelectenerg-900	814	10	t.-c	t.-c	PROPN
fuelectenerg-900	814	11	.	.	PUNCT
fuelectenerg-900	815	1	nguyen	nguyen	NOUN
fuelectenerg-900	815	2	,	,	PUNCT
fuelectenerg-900	815	3	"	"	PUNCT
fuelectenerg-900	815	4	oscillator	oscillator	NOUN
fuelectenerg-900	815	5	far	far	ADV
fuelectenerg-900	815	6	-	-	PUNCT
fuelectenerg-900	815	7	from	from	ADP
fuelectenerg-900	815	8	carrier	carrier	NOUN
fuelectenerg-900	815	9	phase	phase	NOUN
fuelectenerg-900	815	10	noise	noise	NOUN
fuelectenerg-900	815	11	reduction	reduction	NOUN
fuelectenerg-900	815	12	via	via	ADP
fuelectenerg-900	815	13	nano	nano	NOUN
fuelectenerg-900	815	14	-	-	PUNCT
fuelectenerg-900	815	15	scale	scale	NOUN
fuelectenerg-900	815	16	gap	gap	NOUN
fuelectenerg-900	815	17	tuning	tuning	NOUN
fuelectenerg-900	815	18	of	of	ADP
fuelectenerg-900	815	19	micromechanical	micromechanical	ADJ
fuelectenerg-900	815	20	resonators	resonator	NOUN
fuelectenerg-900	815	21	"	"	PUNCT
fuelectenerg-900	815	22	,	,	PUNCT
fuelectenerg-900	815	23	in	in	ADP
fuelectenerg-900	815	24	proceedings	proceeding	NOUN
fuelectenerg-900	815	25	of	of	ADP
fuelectenerg-900	815	26	the	the	DET
fuelectenerg-900	815	27	solid	solid	ADJ
fuelectenerg-900	815	28	-	-	PUNCT
fuelectenerg-900	815	29	state	state	NOUN
fuelectenerg-900	815	30	sensors	sensor	NOUN
fuelectenerg-900	815	31	,	,	PUNCT
fuelectenerg-900	815	32	actuators	actuator	NOUN
fuelectenerg-900	815	33	and	and	CCONJ
fuelectenerg-900	815	34	microsystems	microsystem	NOUN
fuelectenerg-900	815	35	conference	conference	NOUN
fuelectenerg-900	815	36	(	(	PUNCT
fuelectenerg-900	815	37	transducers	transducer	NOUN
fuelectenerg-900	815	38	)	)	PUNCT
fuelectenerg-900	815	39	,	,	PUNCT
fuelectenerg-900	815	40	denver	denver	PROPN
fuelectenerg-900	815	41	,	,	PUNCT
fuelectenerg-900	815	42	co	co	NOUN
fuelectenerg-900	815	43	,	,	PUNCT
fuelectenerg-900	815	44	2009	2009	NUM
fuelectenerg-900	815	45	,	,	PUNCT
fuelectenerg-900	815	46	pp	pp	ADV
fuelectenerg-900	815	47	.	.	PUNCT
fuelectenerg-900	816	1	798–801	798–801	NUM
fuelectenerg-900	816	2	.	.	PUNCT
fuelectenerg-900	817	1	[	[	X
fuelectenerg-900	817	2	62	62	NUM
fuelectenerg-900	817	3	]	]	PUNCT
fuelectenerg-900	817	4	m.	m.	NOUN
fuelectenerg-900	817	5	ziaei	ziaei	NOUN
fuelectenerg-900	817	6	-	-	PUNCT
fuelectenerg-900	817	7	moayyed	moayye	VERB
fuelectenerg-900	817	8	,	,	PUNCT
fuelectenerg-900	817	9	j.	j.	PROPN
fuelectenerg-900	817	10	hsieh	hsieh	PROPN
fuelectenerg-900	817	11	,	,	PUNCT
fuelectenerg-900	817	12	j.-w	j.-w	PROPN
fuelectenerg-900	817	13	.	.	PUNCT
fuelectenerg-900	818	1	p.	p.	NOUN
fuelectenerg-900	818	2	chen	chen	PROPN
fuelectenerg-900	818	3	,	,	PUNCT
fuelectenerg-900	818	4	e.	e.	PROPN
fuelectenerg-900	818	5	p.	p.	PROPN
fuelectenerg-900	818	6	quevy	quevy	PROPN
fuelectenerg-900	818	7	,	,	PUNCT
fuelectenerg-900	818	8	d.	d.	PROPN
fuelectenerg-900	818	9	elata	elata	PROPN
fuelectenerg-900	818	10	and	and	CCONJ
fuelectenerg-900	818	11	r.	r.	PROPN
fuelectenerg-900	818	12	t.	t.	PROPN
fuelectenerg-900	818	13	howe	howe	PROPN
fuelectenerg-900	818	14	,	,	PUNCT
fuelectenerg-900	818	15	"	"	PUNCT
fuelectenerg-900	818	16	higher	high	ADJ
fuelectenerg-900	818	17	-	-	PUNCT
fuelectenerg-900	818	18	order	order	NOUN
fuelectenerg-900	818	19	mode	mode	NOUN
fuelectenerg-900	818	20	internal	internal	ADJ
fuelectenerg-900	818	21	electrostatic	electrostatic	ADJ
fuelectenerg-900	818	22	transduction	transduction	NOUN
fuelectenerg-900	818	23	of	of	ADP
fuelectenerg-900	818	24	a	a	DET
fuelectenerg-900	818	25	bulk	bulk	ADJ
fuelectenerg-900	818	26	-	-	PUNCT
fuelectenerg-900	818	27	mode	mode	NOUN
fuelectenerg-900	818	28	ring	ring	NOUN
fuelectenerg-900	818	29	resonator	resonator	NOUN
fuelectenerg-900	818	30	on	on	ADP
fuelectenerg-900	818	31	a	a	DET
fuelectenerg-900	818	32	quartz	quartz	NOUN
fuelectenerg-900	818	33	substrate	substrate	NOUN
fuelectenerg-900	818	34	"	"	PUNCT
fuelectenerg-900	818	35	,	,	PUNCT
fuelectenerg-900	818	36	in	in	ADP
fuelectenerg-900	818	37	rf	rf	NOUN
fuelectenerg-900	818	38	mems	mem	NOUN
fuelectenerg-900	818	39	/	/	SYM
fuelectenerg-900	818	40	nems	nem	NOUN
fuelectenerg-900	818	41	resonators	resonator	NOUN
fuelectenerg-900	818	42	for	for	ADP
fuelectenerg-900	818	43	wireless	wireless	ADJ
fuelectenerg-900	818	44	communication	communication	NOUN
fuelectenerg-900	818	45	systems	system	NOUN
fuelectenerg-900	818	46	and	and	CCONJ
fuelectenerg-900	818	47	adsorption	adsorption	NOUN
fuelectenerg-900	818	48	-	-	PUNCT
fuelectenerg-900	818	49	desorption	desorption	NOUN
fuelectenerg-900	818	50	phase	phase	NOUN
fuelectenerg-900	818	51	noise	noise	NOUN
fuelectenerg-900	818	52	379	379	NUM
fuelectenerg-900	818	53	proceedings	proceeding	NOUN
fuelectenerg-900	818	54	of	of	ADP
fuelectenerg-900	818	55	the	the	DET
fuelectenerg-900	818	56	17th	17th	ADJ
fuelectenerg-900	818	57	international	international	ADJ
fuelectenerg-900	818	58	solid	solid	ADJ
fuelectenerg-900	818	59	-	-	PUNCT
fuelectenerg-900	818	60	state	state	NOUN
fuelectenerg-900	818	61	sensors	sensor	NOUN
fuelectenerg-900	818	62	,	,	PUNCT
fuelectenerg-900	818	63	actuators	actuator	NOUN
fuelectenerg-900	818	64	and	and	CCONJ
fuelectenerg-900	818	65	microsystems	microsystem	NOUN
fuelectenerg-900	818	66	conference	conference	NOUN
fuelectenerg-900	818	67	(	(	PUNCT
fuelectenerg-900	818	68	transducers	transducer	NOUN
fuelectenerg-900	818	69	)	)	PUNCT
fuelectenerg-900	818	70	,	,	PUNCT
fuelectenerg-900	818	71	denver	denver	PROPN
fuelectenerg-900	818	72	,	,	PUNCT
fuelectenerg-900	818	73	co	co	NOUN
fuelectenerg-900	818	74	,	,	PUNCT
fuelectenerg-900	818	75	2009	2009	NUM
fuelectenerg-900	818	76	,	,	PUNCT
fuelectenerg-900	818	77	pp	pp	X
fuelectenerg-900	818	78	.	.	PUNCT
fuelectenerg-900	819	1	2338–2341	2338–2341	NUM
fuelectenerg-900	819	2	.	.	PUNCT
fuelectenerg-900	820	1	[	[	X
fuelectenerg-900	820	2	63	63	NUM
fuelectenerg-900	820	3	]	]	X
fuelectenerg-900	820	4	v.	v.	ADP
fuelectenerg-900	820	5	kaajakari	kaajakari	PROPN
fuelectenerg-900	820	6	,	,	PUNCT
fuelectenerg-900	820	7	t.	t.	PROPN
fuelectenerg-900	820	8	mattila	mattila	PROPN
fuelectenerg-900	820	9	,	,	PUNCT
fuelectenerg-900	820	10	j.	j.	PROPN
fuelectenerg-900	820	11	kiihamaki	kiihamaki	PROPN
fuelectenerg-900	820	12	,	,	PUNCT
fuelectenerg-900	820	13	h.	h.	PROPN
fuelectenerg-900	820	14	kattelus	kattelus	PROPN
fuelectenerg-900	820	15	,	,	PUNCT
fuelectenerg-900	820	16	a.	a.	NOUN
fuelectenerg-900	820	17	oja	oja	PROPN
fuelectenerg-900	820	18	and	and	CCONJ
fuelectenerg-900	820	19	h.	h.	PROPN
fuelectenerg-900	820	20	seppa	seppa	PROPN
fuelectenerg-900	820	21	,	,	PUNCT
fuelectenerg-900	820	22	"	"	PUNCT
fuelectenerg-900	820	23	nonlinearities	nonlinearitie	NOUN
fuelectenerg-900	820	24	in	in	ADP
fuelectenerg-900	820	25	singlecrystal	singlecrystal	ADJ
fuelectenerg-900	820	26	silicon	silicon	NOUN
fuelectenerg-900	820	27	micromechanical	micromechanical	ADJ
fuelectenerg-900	820	28	resonators	resonator	NOUN
fuelectenerg-900	820	29	"	"	PUNCT
fuelectenerg-900	820	30	,	,	PUNCT
fuelectenerg-900	820	31	in	in	ADP
fuelectenerg-900	820	32	proceedings	proceeding	NOUN
fuelectenerg-900	820	33	of	of	ADP
fuelectenerg-900	820	34	the	the	DET
fuelectenerg-900	820	35	12th	12th	ADJ
fuelectenerg-900	820	36	international	international	ADJ
fuelectenerg-900	820	37	conference	conference	NOUN
fuelectenerg-900	820	38	on	on	ADP
fuelectenerg-900	820	39	solid	solid	ADJ
fuelectenerg-900	820	40	state	state	NOUN
fuelectenerg-900	820	41	sensors	sensor	NOUN
fuelectenerg-900	820	42	,	,	PUNCT
fuelectenerg-900	820	43	actuators	actuator	NOUN
fuelectenerg-900	820	44	and	and	CCONJ
fuelectenerg-900	820	45	microsystems	microsystem	NOUN
fuelectenerg-900	820	46	,	,	PUNCT
fuelectenerg-900	820	47	boston	boston	PROPN
fuelectenerg-900	820	48	,	,	PUNCT
fuelectenerg-900	820	49	ma	ma	PROPN
fuelectenerg-900	820	50	,	,	PUNCT
fuelectenerg-900	820	51	2003	2003	NUM
fuelectenerg-900	820	52	,	,	PUNCT
fuelectenerg-900	820	53	pp	pp	ADJ
fuelectenerg-900	820	54	.	.	PUNCT
fuelectenerg-900	821	1	1574–1577	1574–1577	X
fuelectenerg-900	821	2	.	.	PUNCT
fuelectenerg-900	822	1	[	[	X
fuelectenerg-900	822	2	64	64	NUM
fuelectenerg-900	822	3	]	]	PUNCT
fuelectenerg-900	822	4	m.	m.	NOUN
fuelectenerg-900	822	5	u.	u.	PROPN
fuelectenerg-900	822	6	demirci	demirci	PROPN
fuelectenerg-900	822	7	and	and	CCONJ
fuelectenerg-900	822	8	c.	c.	PROPN
fuelectenerg-900	822	9	nguyen	nguyen	PROPN
fuelectenerg-900	822	10	,	,	PUNCT
fuelectenerg-900	822	11	"	"	PUNCT
fuelectenerg-900	822	12	mechanically	mechanically	ADV
fuelectenerg-900	822	13	corner	corner	NOUN
fuelectenerg-900	822	14	-	-	PUNCT
fuelectenerg-900	822	15	coupled	couple	VERB
fuelectenerg-900	822	16	square	square	ADJ
fuelectenerg-900	822	17	microresonator	microresonator	NOUN
fuelectenerg-900	822	18	array	array	NOUN
fuelectenerg-900	822	19	for	for	ADP
fuelectenerg-900	822	20	reduced	reduce	VERB
fuelectenerg-900	822	21	series	series	NOUN
fuelectenerg-900	822	22	motional	motional	ADJ
fuelectenerg-900	822	23	resistance	resistance	NOUN
fuelectenerg-900	822	24	"	"	PUNCT
fuelectenerg-900	822	25	,	,	PUNCT
fuelectenerg-900	822	26	ieee	ieee	PROPN
fuelectenerg-900	822	27	/	/	SYM
fuelectenerg-900	822	28	asme	asme	PROPN
fuelectenerg-900	822	29	j.	j.	PROPN
fuelectenerg-900	822	30	microelectromechanical	microelectromechanical	PROPN
fuelectenerg-900	822	31	systems	system	NOUN
fuelectenerg-900	822	32	,	,	PUNCT
fuelectenerg-900	822	33	vol	vol	NOUN
fuelectenerg-900	822	34	.	.	PROPN
fuelectenerg-900	822	35	15	15	NUM
fuelectenerg-900	822	36	,	,	PUNCT
fuelectenerg-900	822	37	pp	pp	ADJ
fuelectenerg-900	822	38	.	.	PUNCT
fuelectenerg-900	823	1	1419	1419	NUM
fuelectenerg-900	823	2	-	-	SYM
fuelectenerg-900	823	3	1436	1436	NUM
fuelectenerg-900	823	4	,	,	PUNCT
fuelectenerg-900	823	5	dec	dec	PROPN
fuelectenerg-900	823	6	.	.	PROPN
fuelectenerg-900	823	7	2006	2006	NUM
fuelectenerg-900	823	8	.	.	PUNCT
fuelectenerg-900	824	1	[	[	X
fuelectenerg-900	824	2	65	65	NUM
fuelectenerg-900	824	3	]	]	X
fuelectenerg-900	824	4	c.t.-c	c.t.-c	NOUN
fuelectenerg-900	824	5	.	.	PUNCT
fuelectenerg-900	825	1	nguyen	nguyen	PROPN
fuelectenerg-900	825	2	,	,	PUNCT
fuelectenerg-900	825	3	"	"	PUNCT
fuelectenerg-900	825	4	mems	mem	NOUN
fuelectenerg-900	825	5	technology	technology	NOUN
fuelectenerg-900	825	6	for	for	ADP
fuelectenerg-900	825	7	timing	timing	NOUN
fuelectenerg-900	825	8	and	and	CCONJ
fuelectenerg-900	825	9	frequency	frequency	NOUN
fuelectenerg-900	825	10	control	control	NOUN
fuelectenerg-900	825	11	"	"	PUNCT
fuelectenerg-900	825	12	,	,	PUNCT
fuelectenerg-900	825	13	ieee	ieee	PROPN
fuelectenerg-900	825	14	trans	trans	PROPN
fuelectenerg-900	825	15	.	.	PUNCT
fuelectenerg-900	826	1	ultrason	ultrason	PROPN
fuelectenerg-900	826	2	.	.	PUNCT
fuelectenerg-900	827	1	ferroelect	ferroelect	PROPN
fuelectenerg-900	827	2	.	.	PUNCT
fuelectenerg-900	828	1	freq	freq	PROPN
fuelectenerg-900	828	2	.	.	PUNCT
fuelectenerg-900	829	1	control	control	NOUN
fuelectenerg-900	829	2	,	,	PUNCT
fuelectenerg-900	829	3	vol	vol	NOUN
fuelectenerg-900	829	4	.	.	PROPN
fuelectenerg-900	829	5	54	54	NUM
fuelectenerg-900	829	6	,	,	PUNCT
fuelectenerg-900	829	7	pp	pp	ADJ
fuelectenerg-900	829	8	.	.	PUNCT
fuelectenerg-900	830	1	251	251	NUM
fuelectenerg-900	830	2	-	-	SYM
fuelectenerg-900	830	3	270	270	NUM
fuelectenerg-900	830	4	,	,	PUNCT
fuelectenerg-900	830	5	2007	2007	NUM
fuelectenerg-900	830	6	.	.	PUNCT
fuelectenerg-900	831	1	[	[	X
fuelectenerg-900	831	2	66	66	NUM
fuelectenerg-900	831	3	]	]	X
fuelectenerg-900	831	4	y.	y.	PROPN
fuelectenerg-900	831	5	t.	t.	PROPN
fuelectenerg-900	831	6	yang	yang	PROPN
fuelectenerg-900	831	7	,	,	PUNCT
fuelectenerg-900	831	8	k.	k.	PROPN
fuelectenerg-900	831	9	l.	l.	PROPN
fuelectenerg-900	831	10	ekinci	ekinci	PROPN
fuelectenerg-900	831	11	,	,	PUNCT
fuelectenerg-900	831	12	x.	x.	PROPN
fuelectenerg-900	831	13	m.	m.	PROPN
fuelectenerg-900	831	14	h.	h.	PROPN
fuelectenerg-900	831	15	huang	huang	PROPN
fuelectenerg-900	831	16	,	,	PUNCT
fuelectenerg-900	831	17	l.	l.	PROPN
fuelectenerg-900	831	18	m.	m.	PROPN
fuelectenerg-900	831	19	schiavone	schiavone	PROPN
fuelectenerg-900	831	20	,	,	PUNCT
fuelectenerg-900	831	21	m.	m.	PROPN
fuelectenerg-900	831	22	l.	l.	PROPN
fuelectenerg-900	831	23	roukes	roukes	PROPN
fuelectenerg-900	831	24	,	,	PUNCT
fuelectenerg-900	831	25	c.	c.	PROPN
fuelectenerg-900	831	26	a.	a.	NOUN
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fuelectenerg-900	831	28	and	and	CCONJ
fuelectenerg-900	831	29	m.	m.	NOUN
fuelectenerg-900	831	30	mehregany	mehregany	NOUN
fuelectenerg-900	831	31	,	,	PUNCT
fuelectenerg-900	831	32	"	"	PUNCT
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fuelectenerg-900	831	35	carbide	carbide	PROPN
fuelectenerg-900	831	36	nanoelectromechanical	nanoelectromechanical	ADJ
fuelectenerg-900	831	37	systems	system	NOUN
fuelectenerg-900	831	38	"	"	PUNCT
fuelectenerg-900	831	39	,	,	PUNCT
fuelectenerg-900	831	40	appl	appl	PROPN
fuelectenerg-900	831	41	.	.	PUNCT
fuelectenerg-900	832	1	phys	phy	NOUN
fuelectenerg-900	832	2	.	.	PUNCT
fuelectenerg-900	833	1	lett	lett	PROPN
fuelectenerg-900	833	2	.	.	PROPN
fuelectenerg-900	833	3	,	,	PUNCT
fuelectenerg-900	833	4	vol	vol	NOUN
fuelectenerg-900	833	5	.	.	PROPN
fuelectenerg-900	834	1	78	78	NUM
fuelectenerg-900	834	2	,	,	PUNCT
fuelectenerg-900	834	3	pp	pp	ADJ
fuelectenerg-900	834	4	.	.	PUNCT
fuelectenerg-900	835	1	162	162	NUM
fuelectenerg-900	835	2	-	-	SYM
fuelectenerg-900	835	3	164	164	NUM
fuelectenerg-900	835	4	,	,	PUNCT
fuelectenerg-900	835	5	2001	2001	NUM
fuelectenerg-900	835	6	.	.	PUNCT
fuelectenerg-900	836	1	[	[	X
fuelectenerg-900	836	2	67	67	NUM
fuelectenerg-900	836	3	]	]	X
fuelectenerg-900	836	4	h.	h.	PROPN
fuelectenerg-900	836	5	a.	a.	PROPN
fuelectenerg-900	836	6	c.	c.	PROPN
fuelectenerg-900	836	7	tilmans	tilmans	PROPN
fuelectenerg-900	836	8	,	,	PUNCT
fuelectenerg-900	836	9	m.	m.	NOUN
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fuelectenerg-900	836	11	and	and	CCONJ
fuelectenerg-900	836	12	j.	j.	PROPN
fuelectenerg-900	836	13	h.	h.	PROPN
fuelectenerg-900	836	14	j.	j.	PROPN
fuelectenerg-900	836	15	fluitman	fluitman	PROPN
fuelectenerg-900	836	16	,	,	PUNCT
fuelectenerg-900	836	17	"	"	PUNCT
fuelectenerg-900	836	18	micro	micro	ADJ
fuelectenerg-900	836	19	resonant	resonant	ADJ
fuelectenerg-900	836	20	force	force	NOUN
fuelectenerg-900	836	21	gauges	gauge	VERB
fuelectenerg-900	836	22	"	"	PUNCT
fuelectenerg-900	836	23	,	,	PUNCT
fuelectenerg-900	836	24	sens	sen	NOUN
fuelectenerg-900	836	25	.	.	PROPN
fuelectenerg-900	836	26	actuators	actuator	NOUN
fuelectenerg-900	836	27	a	a	PRON
fuelectenerg-900	836	28	,	,	PUNCT
fuelectenerg-900	836	29	vol	vol	NOUN
fuelectenerg-900	836	30	.	.	PROPN
fuelectenerg-900	836	31	30	30	NUM
fuelectenerg-900	836	32	,	,	PUNCT
fuelectenerg-900	836	33	pp	pp	ADJ
fuelectenerg-900	836	34	.	.	PUNCT
fuelectenerg-900	837	1	35	35	NUM
fuelectenerg-900	837	2	-	-	SYM
fuelectenerg-900	837	3	53	53	NUM
fuelectenerg-900	837	4	,	,	PUNCT
fuelectenerg-900	837	5	1992	1992	NUM
fuelectenerg-900	837	6	.	.	PUNCT
fuelectenerg-900	838	1	[	[	X
fuelectenerg-900	838	2	68	68	NUM
fuelectenerg-900	838	3	]	]	X
fuelectenerg-900	838	4	c.	c.	PROPN
fuelectenerg-900	838	5	chen	chen	PROPN
fuelectenerg-900	838	6	,	,	PUNCT
fuelectenerg-900	838	7	s.	s.	PROPN
fuelectenerg-900	838	8	lee	lee	PROPN
fuelectenerg-900	838	9	,	,	PUNCT
fuelectenerg-900	838	10	v.	v.	PROPN
fuelectenerg-900	838	11	v.	v.	CCONJ
fuelectenerg-900	838	12	deshpande	deshpande	PROPN
fuelectenerg-900	838	13	,	,	PUNCT
fuelectenerg-900	838	14	g.-h	g.-h	PROPN
fuelectenerg-900	838	15	.	.	PUNCT
fuelectenerg-900	839	1	lee	lee	PROPN
fuelectenerg-900	839	2	,	,	PUNCT
fuelectenerg-900	839	3	m.	m.	PROPN
fuelectenerg-900	839	4	lekas	lekas	PROPN
fuelectenerg-900	839	5	,	,	PUNCT
fuelectenerg-900	839	6	k.	k.	PROPN
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fuelectenerg-900	839	8	and	and	CCONJ
fuelectenerg-900	839	9	j.	j.	PROPN
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fuelectenerg-900	839	11	,	,	PUNCT
fuelectenerg-900	839	12	"	"	PUNCT
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fuelectenerg-900	839	14	mechanical	mechanical	ADJ
fuelectenerg-900	839	15	oscillators	oscillator	NOUN
fuelectenerg-900	839	16	with	with	ADP
fuelectenerg-900	839	17	tunable	tunable	ADJ
fuelectenerg-900	839	18	frequency	frequency	NOUN
fuelectenerg-900	839	19	"	"	PUNCT
fuelectenerg-900	839	20	,	,	PUNCT
fuelectenerg-900	839	21	nat	nat	PROPN
fuelectenerg-900	839	22	.	.	PUNCT
fuelectenerg-900	840	1	nanotechnol	nanotechnol	PROPN
fuelectenerg-900	840	2	.	.	PROPN
fuelectenerg-900	840	3	,	,	PUNCT
fuelectenerg-900	840	4	vol	vol	NOUN
fuelectenerg-900	840	5	.	.	PROPN
fuelectenerg-900	840	6	8	8	NUM
fuelectenerg-900	840	7	,	,	PUNCT
fuelectenerg-900	840	8	pp	pp	ADJ
fuelectenerg-900	840	9	.	.	PUNCT
fuelectenerg-900	841	1	923	923	NUM
fuelectenerg-900	841	2	-	-	SYM
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fuelectenerg-900	841	4	,	,	PUNCT
fuelectenerg-900	841	5	2013	2013	NUM
fuelectenerg-900	841	6	.	.	PUNCT
fuelectenerg-900	842	1	[	[	X
fuelectenerg-900	842	2	69	69	NUM
fuelectenerg-900	842	3	]	]	PUNCT
fuelectenerg-900	842	4	a.	a.	PROPN
fuelectenerg-900	842	5	n.	n.	PROPN
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fuelectenerg-900	842	7	and	and	CCONJ
fuelectenerg-900	842	8	m.	m.	PROPN
fuelectenerg-900	842	9	l.	l.	PROPN
fuelectenerg-900	842	10	roukes	roukes	PROPN
fuelectenerg-900	842	11	,	,	PUNCT
fuelectenerg-900	842	12	"	"	PUNCT
fuelectenerg-900	842	13	fabrication	fabrication	NOUN
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fuelectenerg-900	842	17	nanometer	nanometer	NOUN
fuelectenerg-900	842	18	scale	scale	NOUN
fuelectenerg-900	842	19	mechanical	mechanical	ADJ
fuelectenerg-900	842	20	resonators	resonator	NOUN
fuelectenerg-900	842	21	from	from	ADP
fuelectenerg-900	842	22	bulk	bulk	ADJ
fuelectenerg-900	842	23	si	si	X
fuelectenerg-900	842	24	crystals	crystal	NOUN
fuelectenerg-900	842	25	"	"	PUNCT
fuelectenerg-900	842	26	,	,	PUNCT
fuelectenerg-900	842	27	appl	appl	PROPN
fuelectenerg-900	842	28	.	.	PUNCT
fuelectenerg-900	843	1	phys	phy	NOUN
fuelectenerg-900	843	2	.	.	PUNCT
fuelectenerg-900	844	1	lett	lett	PROPN
fuelectenerg-900	844	2	.	.	PROPN
fuelectenerg-900	844	3	,	,	PUNCT
fuelectenerg-900	844	4	vol	vol	NOUN
fuelectenerg-900	844	5	.	.	PROPN
fuelectenerg-900	845	1	69	69	NUM
fuelectenerg-900	845	2	,	,	PUNCT
fuelectenerg-900	845	3	pp	pp	ADJ
fuelectenerg-900	845	4	.	.	PUNCT
fuelectenerg-900	846	1	2653	2653	NUM
fuelectenerg-900	846	2	-	-	SYM
fuelectenerg-900	846	3	2655	2655	NUM
fuelectenerg-900	846	4	,	,	PUNCT
fuelectenerg-900	846	5	1996	1996	NUM
fuelectenerg-900	846	6	.	.	PUNCT
fuelectenerg-900	847	1	[	[	X
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fuelectenerg-900	847	5	l.	l.	PROPN
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fuelectenerg-900	847	7	and	and	CCONJ
fuelectenerg-900	847	8	m.	m.	PROPN
fuelectenerg-900	847	9	l.	l.	PROPN
fuelectenerg-900	847	10	roukes	roukes	PROPN
fuelectenerg-900	847	11	,	,	PUNCT
fuelectenerg-900	847	12	"	"	PUNCT
fuelectenerg-900	847	13	nanoelectromechanical	nanoelectromechanical	ADJ
fuelectenerg-900	847	14	systems	system	NOUN
fuelectenerg-900	847	15	"	"	PUNCT
fuelectenerg-900	847	16	,	,	PUNCT
fuelectenerg-900	847	17	rev	rev	PROPN
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fuelectenerg-900	847	22	.	.	PUNCT
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fuelectenerg-900	847	25	.	.	PROPN
fuelectenerg-900	848	1	76	76	NUM
fuelectenerg-900	848	2	,	,	PUNCT
fuelectenerg-900	848	3	pp	pp	ADJ
fuelectenerg-900	848	4	.	.	PUNCT
fuelectenerg-900	849	1	061101	061101	NUM
fuelectenerg-900	849	2	,	,	PUNCT
fuelectenerg-900	849	3	2005	2005	NUM
fuelectenerg-900	849	4	.	.	PUNCT
fuelectenerg-900	850	1	[	[	X
fuelectenerg-900	850	2	71	71	NUM
fuelectenerg-900	850	3	]	]	PUNCT
fuelectenerg-900	850	4	x.	x.	PROPN
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fuelectenerg-900	850	8	r.	r.	PROPN
fuelectenerg-900	850	9	r.	r.	PROPN
fuelectenerg-900	850	10	he	he	PRON
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fuelectenerg-900	850	12	p.	p.	PROPN
fuelectenerg-900	850	13	d.	d.	PROPN
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fuelectenerg-900	850	20	"	"	PUNCT
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fuelectenerg-900	850	24	silicon	silicon	NOUN
fuelectenerg-900	850	25	nanowire	nanowire	ADJ
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fuelectenerg-900	850	28	"	"	PUNCT
fuelectenerg-900	850	29	,	,	PUNCT
fuelectenerg-900	850	30	nano	nano	NOUN
fuelectenerg-900	850	31	lett	lett	PROPN
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fuelectenerg-900	850	33	,	,	PUNCT
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fuelectenerg-900	850	35	.	.	PROPN
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fuelectenerg-900	850	39	.	.	PUNCT
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fuelectenerg-900	851	2	-	-	SYM
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fuelectenerg-900	851	4	,	,	PUNCT
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fuelectenerg-900	851	6	.	.	PUNCT
fuelectenerg-900	852	1	[	[	X
fuelectenerg-900	852	2	72	72	NUM
fuelectenerg-900	852	3	]	]	X
fuelectenerg-900	852	4	x.	x.	NOUN
fuelectenerg-900	852	5	m.	m.	PROPN
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fuelectenerg-900	852	8	,	,	PUNCT
fuelectenerg-900	852	9	x.	x.	PROPN
fuelectenerg-900	852	10	l.	l.	PROPN
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fuelectenerg-900	852	17	m.	m.	NOUN
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fuelectenerg-900	852	21	l.	l.	PROPN
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fuelectenerg-900	852	24	"	"	PUNCT
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fuelectenerg-900	852	26	,	,	PUNCT
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fuelectenerg-900	852	28	and	and	CCONJ
fuelectenerg-900	852	29	microwave	microwave	NOUN
fuelectenerg-900	852	30	frequency	frequency	NOUN
fuelectenerg-900	852	31	nanomechanical	nanomechanical	ADJ
fuelectenerg-900	852	32	resonator	resonator	NOUN
fuelectenerg-900	852	33	"	"	PUNCT
fuelectenerg-900	852	34	,	,	PUNCT
fuelectenerg-900	852	35	new	new	ADJ
fuelectenerg-900	852	36	j.	j.	PROPN
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fuelectenerg-900	852	38	.	.	PUNCT
fuelectenerg-900	852	39	,	,	PUNCT
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fuelectenerg-900	852	41	.	.	PROPN
fuelectenerg-900	853	1	7	7	NUM
fuelectenerg-900	853	2	,	,	PUNCT
fuelectenerg-900	853	3	pp	pp	ADJ
fuelectenerg-900	853	4	.	.	PUNCT
fuelectenerg-900	854	1	247	247	NUM
fuelectenerg-900	854	2	1	1	NUM
fuelectenerg-900	854	3	-	-	SYM
fuelectenerg-900	854	4	15	15	NUM
fuelectenerg-900	854	5	,	,	PUNCT
fuelectenerg-900	854	6	2005	2005	NUM
fuelectenerg-900	854	7	.	.	PUNCT
fuelectenerg-900	855	1	[	[	X
fuelectenerg-900	855	2	73	73	NUM
fuelectenerg-900	855	3	]	]	PUNCT
fuelectenerg-900	855	4	d.	d.	PROPN
fuelectenerg-900	855	5	w.	w.	PROPN
fuelectenerg-900	855	6	carr	carr	PROPN
fuelectenerg-900	855	7	,	,	PUNCT
fuelectenerg-900	855	8	s.	s.	PROPN
fuelectenerg-900	855	9	evoy	evoy	PROPN
fuelectenerg-900	855	10	,	,	PUNCT
fuelectenerg-900	855	11	l.	l.	PROPN
fuelectenerg-900	855	12	sekaric	sekaric	PROPN
fuelectenerg-900	855	13	,	,	PUNCT
fuelectenerg-900	855	14	h.	h.	PROPN
fuelectenerg-900	855	15	g.	g.	PROPN
fuelectenerg-900	855	16	craighead	craighead	PROPN
fuelectenerg-900	855	17	and	and	CCONJ
fuelectenerg-900	855	18	j.	j.	PROPN
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fuelectenerg-900	855	21	,	,	PUNCT
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fuelectenerg-900	855	28	losses	loss	NOUN
fuelectenerg-900	855	29	in	in	ADP
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fuelectenerg-900	855	31	scale	scale	NOUN
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fuelectenerg-900	855	33	wires	wire	NOUN
fuelectenerg-900	855	34	"	"	PUNCT
fuelectenerg-900	855	35	,	,	PUNCT
fuelectenerg-900	855	36	appl	appl	PROPN
fuelectenerg-900	855	37	.	.	PUNCT
fuelectenerg-900	856	1	phys	phy	NOUN
fuelectenerg-900	856	2	.	.	PUNCT
fuelectenerg-900	857	1	lett	lett	PROPN
fuelectenerg-900	857	2	.	.	PROPN
fuelectenerg-900	857	3	,	,	PUNCT
fuelectenerg-900	857	4	vol	vol	NOUN
fuelectenerg-900	857	5	.	.	PROPN
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fuelectenerg-900	858	2	,	,	PUNCT
fuelectenerg-900	858	3	pp	pp	ADJ
fuelectenerg-900	858	4	.	.	PUNCT
fuelectenerg-900	859	1	920	920	NUM
fuelectenerg-900	859	2	-	-	SYM
fuelectenerg-900	859	3	922	922	NUM
fuelectenerg-900	859	4	,	,	PUNCT
fuelectenerg-900	859	5	1999	1999	NUM
fuelectenerg-900	859	6	.	.	PUNCT
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fuelectenerg-900	860	2	74	74	NUM
fuelectenerg-900	860	3	]	]	PUNCT
fuelectenerg-900	860	4	x.	x.	NOUN
fuelectenerg-900	860	5	m.	m.	PROPN
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fuelectenerg-900	860	7	huang	huang	PROPN
fuelectenerg-900	860	8	,	,	PUNCT
fuelectenerg-900	860	9	c.	c.	PROPN
fuelectenerg-900	860	10	a.	a.	PROPN
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fuelectenerg-900	860	12	,	,	PUNCT
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fuelectenerg-900	860	16	m.	m.	NOUN
fuelectenerg-900	860	17	l.	l.	PROPN
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fuelectenerg-900	860	19	,	,	PUNCT
fuelectenerg-900	860	20	"	"	PUNCT
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fuelectenerg-900	860	22	motion	motion	NOUN
fuelectenerg-900	860	23	at	at	ADP
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fuelectenerg-900	860	26	"	"	PUNCT
fuelectenerg-900	860	27	,	,	PUNCT
fuelectenerg-900	860	28	nature	nature	NOUN
fuelectenerg-900	860	29	,	,	PUNCT
fuelectenerg-900	860	30	vol	vol	NOUN
fuelectenerg-900	860	31	.	.	PUNCT
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fuelectenerg-900	860	33	,	,	PUNCT
fuelectenerg-900	860	34	pp	pp	ADJ
fuelectenerg-900	860	35	.	.	PUNCT
fuelectenerg-900	861	1	496	496	NUM
fuelectenerg-900	861	2	-	-	SYM
fuelectenerg-900	861	3	496	496	NUM
fuelectenerg-900	861	4	,	,	PUNCT
fuelectenerg-900	861	5	2003	2003	NUM
fuelectenerg-900	861	6	.	.	PUNCT
fuelectenerg-900	862	1	[	[	X
fuelectenerg-900	862	2	75	75	NUM
fuelectenerg-900	862	3	]	]	PUNCT
fuelectenerg-900	862	4	a.	a.	PROPN
fuelectenerg-900	862	5	n.	n.	PROPN
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fuelectenerg-900	862	10	and	and	CCONJ
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fuelectenerg-900	862	22	"	"	PUNCT
fuelectenerg-900	862	23	,	,	PUNCT
fuelectenerg-900	862	24	appl	appl	PROPN
fuelectenerg-900	862	25	.	.	PUNCT
fuelectenerg-900	863	1	phys	phy	NOUN
fuelectenerg-900	863	2	.	.	PUNCT
fuelectenerg-900	864	1	lett	lett	PROPN
fuelectenerg-900	864	2	.	.	PROPN
fuelectenerg-900	864	3	,	,	PUNCT
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fuelectenerg-900	864	5	.	.	PROPN
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fuelectenerg-900	864	7	,	,	PUNCT
fuelectenerg-900	864	8	pp	pp	ADJ
fuelectenerg-900	864	9	.	.	PUNCT
fuelectenerg-900	865	1	2070	2070	NUM
fuelectenerg-900	865	2	-	-	SYM
fuelectenerg-900	865	3	2072	2072	NUM
fuelectenerg-900	865	4	,	,	PUNCT
fuelectenerg-900	865	5	2001	2001	NUM
fuelectenerg-900	865	6	.	.	PUNCT
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fuelectenerg-900	866	2	76	76	NUM
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fuelectenerg-900	866	8	m.	m.	PROPN
fuelectenerg-900	866	9	parpia	parpia	PROPN
fuelectenerg-900	866	10	,	,	PUNCT
fuelectenerg-900	866	11	h.	h.	PROPN
fuelectenerg-900	866	12	g.	g.	PROPN
fuelectenerg-900	866	13	craighead	craighead	PROPN
fuelectenerg-900	866	14	,	,	PUNCT
fuelectenerg-900	866	15	t.	t.	PROPN
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fuelectenerg-900	866	18	b.	b.	PROPN
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fuelectenerg-900	866	22	j.	j.	PROPN
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fuelectenerg-900	866	25	,	,	PUNCT
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fuelectenerg-900	866	30	in	in	ADP
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fuelectenerg-900	866	33	"	"	PUNCT
fuelectenerg-900	866	34	,	,	PUNCT
fuelectenerg-900	866	35	appl	appl	PROPN
fuelectenerg-900	866	36	.	.	PUNCT
fuelectenerg-900	867	1	phys	phy	NOUN
fuelectenerg-900	867	2	.	.	PUNCT
fuelectenerg-900	868	1	lett	lett	PROPN
fuelectenerg-900	868	2	.	.	PROPN
fuelectenerg-900	868	3	,	,	PUNCT
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fuelectenerg-900	868	5	.	.	PROPN
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fuelectenerg-900	868	7	,	,	PUNCT
fuelectenerg-900	868	8	pp	pp	ADJ
fuelectenerg-900	868	9	.	.	PUNCT
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fuelectenerg-900	869	2	-	-	SYM
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fuelectenerg-900	869	4	,	,	PUNCT
fuelectenerg-900	869	5	2002	2002	NUM
fuelectenerg-900	869	6	.	.	PUNCT
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fuelectenerg-900	870	2	77	77	NUM
fuelectenerg-900	870	3	]	]	PUNCT
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fuelectenerg-900	870	5	b.	b.	PROPN
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fuelectenerg-900	870	7	,	,	PUNCT
fuelectenerg-900	870	8	m.	m.	PROPN
fuelectenerg-900	870	9	h.	h.	PROPN
fuelectenerg-900	870	10	matheny	matheny	PROPN
fuelectenerg-900	870	11	,	,	PUNCT
fuelectenerg-900	870	12	x.	x.	PROPN
fuelectenerg-900	870	13	l.	l.	PROPN
fuelectenerg-900	870	14	feng	feng	PROPN
fuelectenerg-900	870	15	,	,	PUNCT
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fuelectenerg-900	870	18	,	,	PUNCT
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fuelectenerg-900	870	22	,	,	PUNCT
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fuelectenerg-900	870	25	,	,	PUNCT
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fuelectenerg-900	870	35	,	,	PUNCT
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fuelectenerg-900	870	46	"	"	PUNCT
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fuelectenerg-900	870	48	appl	appl	PROPN
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fuelectenerg-900	871	2	.	.	PUNCT
fuelectenerg-900	872	1	lett	lett	PROPN
fuelectenerg-900	872	2	.	.	PROPN
fuelectenerg-900	872	3	,	,	PUNCT
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fuelectenerg-900	872	5	.	.	PROPN
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fuelectenerg-900	872	7	,	,	PUNCT
fuelectenerg-900	872	8	pp	pp	ADJ
fuelectenerg-900	872	9	.	.	PUNCT
fuelectenerg-900	873	1	103111	103111	NUM
fuelectenerg-900	873	2	1	1	NUM
fuelectenerg-900	873	3	-	-	SYM
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fuelectenerg-900	873	5	,	,	PUNCT
fuelectenerg-900	873	6	2009	2009	NUM
fuelectenerg-900	873	7	.	.	PUNCT
fuelectenerg-900	874	1	[	[	X
fuelectenerg-900	874	2	78	78	NUM
fuelectenerg-900	874	3	]	]	PUNCT
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fuelectenerg-900	874	7	j.	j.	PROPN
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fuelectenerg-900	874	9	,	,	PUNCT
fuelectenerg-900	874	10	h.	h.	PROPN
fuelectenerg-900	874	11	w.	w.	PROPN
fuelectenerg-900	874	12	ch	ch	PROPN
fuelectenerg-900	874	13	.	.	PROPN
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fuelectenerg-900	874	15	,	,	PUNCT
fuelectenerg-900	874	16	x.	x.	PROPN
fuelectenerg-900	874	17	m.	m.	PROPN
fuelectenerg-900	874	18	h.	h.	PROPN
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fuelectenerg-900	874	20	,	,	PUNCT
fuelectenerg-900	874	21	t.	t.	PROPN
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fuelectenerg-900	874	30	m.	m.	PROPN
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fuelectenerg-900	874	33	-	-	PUNCT
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fuelectenerg-900	874	42	"	"	PUNCT
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fuelectenerg-900	874	44	appl	appl	PROPN
fuelectenerg-900	874	45	.	.	PUNCT
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fuelectenerg-900	875	2	.	.	PUNCT
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fuelectenerg-900	876	2	.	.	PROPN
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fuelectenerg-900	876	5	.	.	PROPN
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fuelectenerg-900	876	7	,	,	PUNCT
fuelectenerg-900	876	8	pp	pp	ADJ
fuelectenerg-900	876	9	.	.	PUNCT
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fuelectenerg-900	877	2	-	-	SYM
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fuelectenerg-900	877	4	,	,	PUNCT
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fuelectenerg-900	877	6	.	.	PUNCT
fuelectenerg-900	878	1	[	[	X
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fuelectenerg-900	878	3	]	]	PUNCT
fuelectenerg-900	878	4	t.	t.	PROPN
fuelectenerg-900	878	5	f.	f.	PROPN
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fuelectenerg-900	878	7	,	,	PUNCT
fuelectenerg-900	878	8	y.	y.	PROPN
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fuelectenerg-900	878	10	,	,	PUNCT
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fuelectenerg-900	878	13	,	,	PUNCT
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fuelectenerg-900	878	20	and	and	CCONJ
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fuelectenerg-900	878	32	"	"	PUNCT
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fuelectenerg-900	879	2	.	.	PUNCT
fuelectenerg-900	880	1	lett	lett	PROPN
fuelectenerg-900	880	2	.	.	PROPN
fuelectenerg-900	880	3	,	,	PUNCT
fuelectenerg-900	880	4	vol	vol	NOUN
fuelectenerg-900	880	5	.	.	PROPN
fuelectenerg-900	881	1	92	92	NUM
fuelectenerg-900	881	2	,	,	PUNCT
fuelectenerg-900	881	3	pp	pp	ADJ
fuelectenerg-900	881	4	.	.	PUNCT
fuelectenerg-900	882	1	043112	043112	NUM
fuelectenerg-900	883	1	1	1	NUM
fuelectenerg-900	883	2	-	-	SYM
fuelectenerg-900	883	3	3	3	NUM
fuelectenerg-900	883	4	,	,	PUNCT
fuelectenerg-900	883	5	2008	2008	NUM
fuelectenerg-900	883	6	.	.	PUNCT
fuelectenerg-900	884	1	[	[	X
fuelectenerg-900	884	2	80	80	NUM
fuelectenerg-900	884	3	]	]	X
fuelectenerg-900	884	4	n.	n.	PROPN
fuelectenerg-900	884	5	a.	a.	PROPN
fuelectenerg-900	884	6	melosh	melosh	PROPN
fuelectenerg-900	884	7	,	,	PUNCT
fuelectenerg-900	884	8	a.	a.	NOUN
fuelectenerg-900	884	9	boukai	boukai	PROPN
fuelectenerg-900	884	10	,	,	PUNCT
fuelectenerg-900	884	11	f.	f.	PROPN
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fuelectenerg-900	884	13	,	,	PUNCT
fuelectenerg-900	884	14	b.	b.	PROPN
fuelectenerg-900	884	15	gerardo	gerardo	PROPN
fuelectenerg-900	884	16	,	,	PUNCT
fuelectenerg-900	884	17	a.	a.	NOUN
fuelectenerg-900	884	18	badolato	badolato	NOUN
fuelectenerg-900	884	19	,	,	PUNCT
fuelectenerg-900	884	20	p.	p.	NOUN
fuelectenerg-900	884	21	m.	m.	NOUN
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fuelectenerg-900	884	23	and	and	CCONJ
fuelectenerg-900	884	24	j.	j.	PROPN
fuelectenerg-900	884	25	r.	r.	PROPN
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fuelectenerg-900	884	27	,	,	PUNCT
fuelectenerg-900	884	28	"	"	PUNCT
fuelectenerg-900	884	29	ultrahighdensity	ultrahighdensity	NOUN
fuelectenerg-900	884	30	nanowire	nanowire	NOUN
fuelectenerg-900	884	31	lattices	lattice	NOUN
fuelectenerg-900	884	32	and	and	CCONJ
fuelectenerg-900	884	33	circuits	circuit	NOUN
fuelectenerg-900	884	34	"	"	PUNCT
fuelectenerg-900	884	35	,	,	PUNCT
fuelectenerg-900	884	36	science	science	NOUN
fuelectenerg-900	884	37	,	,	PUNCT
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fuelectenerg-900	884	39	.	.	PROPN
fuelectenerg-900	885	1	300	300	NUM
fuelectenerg-900	885	2	,	,	PUNCT
fuelectenerg-900	885	3	pp	pp	ADJ
fuelectenerg-900	885	4	.	.	PUNCT
fuelectenerg-900	886	1	112	112	NUM
fuelectenerg-900	886	2	-	-	SYM
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fuelectenerg-900	886	4	,	,	PUNCT
fuelectenerg-900	886	5	2003	2003	NUM
fuelectenerg-900	886	6	.	.	PUNCT
fuelectenerg-900	887	1	[	[	X
fuelectenerg-900	887	2	81	81	NUM
fuelectenerg-900	887	3	]	]	PUNCT
fuelectenerg-900	887	4	x.	x.	PROPN
fuelectenerg-900	887	5	l.	l.	PROPN
fuelectenerg-900	887	6	feng	feng	PROPN
fuelectenerg-900	887	7	,	,	PUNCT
fuelectenerg-900	887	8	m.	m.	PROPN
fuelectenerg-900	887	9	h.	h.	PROPN
fuelectenerg-900	887	10	matheny	matheny	PROPN
fuelectenerg-900	887	11	,	,	PUNCT
fuelectenerg-900	887	12	c.	c.	PROPN
fuelectenerg-900	887	13	a.	a.	PROPN
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fuelectenerg-900	887	15	,	,	PUNCT
fuelectenerg-900	887	16	m.	m.	NOUN
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fuelectenerg-900	887	19	m.	m.	NOUN
fuelectenerg-900	887	20	l.	l.	PROPN
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fuelectenerg-900	887	22	,	,	PUNCT
fuelectenerg-900	887	23	"	"	PUNCT
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fuelectenerg-900	887	26	nanoelectromechanical	nanoelectromechanical	ADJ
fuelectenerg-900	887	27	switches	switch	NOUN
fuelectenerg-900	887	28	based	base	VERB
fuelectenerg-900	887	29	on	on	ADP
fuelectenerg-900	887	30	silicon	silicon	NOUN
fuelectenerg-900	887	31	carbide	carbide	NOUN
fuelectenerg-900	887	32	nanowires	nanowire	NOUN
fuelectenerg-900	887	33	"	"	PUNCT
fuelectenerg-900	887	34	,	,	PUNCT
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fuelectenerg-900	887	37	.	.	PUNCT
fuelectenerg-900	887	38	,	,	PUNCT
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fuelectenerg-900	887	40	.	.	PROPN
fuelectenerg-900	887	41	10	10	NUM
fuelectenerg-900	887	42	,	,	PUNCT
fuelectenerg-900	887	43	pp	pp	ADJ
fuelectenerg-900	887	44	.	.	PUNCT
fuelectenerg-900	887	45	28912896	28912896	NUM
fuelectenerg-900	887	46	,	,	PUNCT
fuelectenerg-900	887	47	2010	2010	NUM
fuelectenerg-900	887	48	.	.	PUNCT
fuelectenerg-900	888	1	[	[	X
fuelectenerg-900	888	2	82	82	NUM
fuelectenerg-900	888	3	]	]	X
fuelectenerg-900	888	4	o.	o.	PROPN
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fuelectenerg-900	888	8	,	,	PUNCT
fuelectenerg-900	888	9	g.	g.	PROPN
fuelectenerg-900	888	10	villanueva	villanueva	PROPN
fuelectenerg-900	888	11	,	,	PUNCT
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fuelectenerg-900	888	14	,	,	PUNCT
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fuelectenerg-900	888	17	,	,	PUNCT
fuelectenerg-900	888	18	m.	m.	PROPN
fuelectenerg-900	888	19	a.	a.	PROPN
fuelectenerg-900	888	20	f.	f.	PROPN
fuelectenerg-900	888	21	van	van	PROPN
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fuelectenerg-900	888	25	j.	j.	PROPN
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fuelectenerg-900	888	27	,	,	PUNCT
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fuelectenerg-900	888	30	nanowires	nanowire	NOUN
fuelectenerg-900	888	31	by	by	ADP
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fuelectenerg-900	888	33	wafer	wafer	NOUN
fuelectenerg-900	888	34	stencil	stencil	NOUN
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fuelectenerg-900	888	36	"	"	PUNCT
fuelectenerg-900	888	37	,	,	PUNCT
fuelectenerg-900	888	38	nano	nano	NOUN
fuelectenerg-900	888	39	lett	lett	PROPN
fuelectenerg-900	888	40	.	.	PUNCT
fuelectenerg-900	888	41	,	,	PUNCT
fuelectenerg-900	888	42	vol	vol	NOUN
fuelectenerg-900	888	43	.	.	PROPN
fuelectenerg-900	888	44	8	8	NUM
fuelectenerg-900	888	45	,	,	PUNCT
fuelectenerg-900	888	46	pp	pp	ADJ
fuelectenerg-900	888	47	.	.	PUNCT
fuelectenerg-900	889	1	3675	3675	NUM
fuelectenerg-900	889	2	-	-	SYM
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fuelectenerg-900	889	4	,	,	PUNCT
fuelectenerg-900	889	5	2008	2008	NUM
fuelectenerg-900	889	6	.	.	PUNCT
fuelectenerg-900	890	1	[	[	X
fuelectenerg-900	890	2	83	83	NUM
fuelectenerg-900	890	3	]	]	PUNCT
fuelectenerg-900	890	4	r.	r.	PROPN
fuelectenerg-900	890	5	he	he	PRON
fuelectenerg-900	890	6	,	,	PUNCT
fuelectenerg-900	890	7	d.	d.	PROPN
fuelectenerg-900	890	8	gao	gao	PROPN
fuelectenerg-900	890	9	,	,	PUNCT
fuelectenerg-900	890	10	r.	r.	PROPN
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fuelectenerg-900	890	12	,	,	PUNCT
fuelectenerg-900	890	13	a.	a.	PROPN
fuelectenerg-900	890	14	i.	i.	PROPN
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fuelectenerg-900	890	16	,	,	PUNCT
fuelectenerg-900	890	17	c.	c.	PROPN
fuelectenerg-900	890	18	carraro	carraro	PROPN
fuelectenerg-900	890	19	,	,	PUNCT
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fuelectenerg-900	890	22	and	and	CCONJ
fuelectenerg-900	890	23	p.	p.	PROPN
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fuelectenerg-900	890	25	,	,	PUNCT
fuelectenerg-900	890	26	"	"	PUNCT
fuelectenerg-900	890	27	si	si	X
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fuelectenerg-900	890	30	in	in	ADP
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fuelectenerg-900	890	32	:	:	PUNCT
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fuelectenerg-900	890	36	into	into	ADP
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fuelectenerg-900	890	39	"	"	PUNCT
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fuelectenerg-900	890	41	adv	adv	PROPN
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fuelectenerg-900	890	44	.	.	PUNCT
fuelectenerg-900	890	45	,	,	PUNCT
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fuelectenerg-900	890	47	.	.	PROPN
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fuelectenerg-900	890	49	,	,	PUNCT
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fuelectenerg-900	890	51	.	.	PUNCT
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fuelectenerg-900	890	53	-	-	SYM
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fuelectenerg-900	890	55	,	,	PUNCT
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fuelectenerg-900	890	57	.	.	PUNCT
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fuelectenerg-900	891	3	]	]	PUNCT
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fuelectenerg-900	891	5	r.	r.	PROPN
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fuelectenerg-900	891	7	,	,	PUNCT
fuelectenerg-900	891	8	x.	x.	PROPN
fuelectenerg-900	891	9	l.	l.	PROPN
fuelectenerg-900	891	10	feng	feng	PROPN
fuelectenerg-900	891	11	,	,	PUNCT
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fuelectenerg-900	891	13	l.	l.	PROPN
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fuelectenerg-900	891	16	p.	p.	PROPN
fuelectenerg-900	891	17	d.	d.	PROPN
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fuelectenerg-900	891	20	"	"	PUNCT
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fuelectenerg-900	891	25	nanowire	nanowire	ADJ
fuelectenerg-900	891	26	electromechanical	electromechanical	ADJ
fuelectenerg-900	891	27	systems	system	NOUN
fuelectenerg-900	891	28	at	at	ADP
fuelectenerg-900	891	29	room	room	NOUN
fuelectenerg-900	891	30	temperature	temperature	NOUN
fuelectenerg-900	891	31	"	"	PUNCT
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fuelectenerg-900	891	38	.	.	PROPN
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fuelectenerg-900	891	40	,	,	PUNCT
fuelectenerg-900	891	41	pp	pp	ADJ
fuelectenerg-900	891	42	.	.	PUNCT
fuelectenerg-900	891	43	1756	1756	NUM
fuelectenerg-900	891	44	-	-	SYM
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fuelectenerg-900	891	46	,	,	PUNCT
fuelectenerg-900	891	47	2008	2008	NUM
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fuelectenerg-900	892	2	85	85	NUM
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fuelectenerg-900	892	9	and	and	CCONJ
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fuelectenerg-900	892	12	,	,	PUNCT
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fuelectenerg-900	892	18	a	a	DET
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fuelectenerg-900	892	20	cavity	cavity	NOUN
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fuelectenerg-900	892	22	"	"	PUNCT
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fuelectenerg-900	893	2	,	,	PUNCT
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fuelectenerg-900	893	4	.	.	PROPN
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fuelectenerg-900	893	7	pp	pp	ADJ
fuelectenerg-900	893	8	.	.	PUNCT
fuelectenerg-900	894	1	555–560	555–560	NUM
fuelectenerg-900	894	2	,	,	PUNCT
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fuelectenerg-900	894	4	.	.	PUNCT
fuelectenerg-900	895	1	380	380	NUM
fuelectenerg-900	895	2	i.	i.	PROPN
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fuelectenerg-900	895	4	,	,	PUNCT
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fuelectenerg-900	895	7	,	,	PUNCT
fuelectenerg-900	895	8	z.	z.	PROPN
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fuelectenerg-900	895	10	,	,	PUNCT
fuelectenerg-900	895	11	m.	m.	NOUN
fuelectenerg-900	895	12	l.	l.	PROPN
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fuelectenerg-900	896	1	[	[	X
fuelectenerg-900	896	2	86	86	NUM
fuelectenerg-900	896	3	]	]	PUNCT
fuelectenerg-900	896	4	s.	s.	PROPN
fuelectenerg-900	896	5	t.	t.	PROPN
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fuelectenerg-900	896	7	,	,	PUNCT
fuelectenerg-900	896	8	a.	a.	PROPN
fuelectenerg-900	896	9	lovera	lovera	PROPN
fuelectenerg-900	896	10	,	,	PUNCT
fuelectenerg-900	896	11	d.	d.	PROPN
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fuelectenerg-900	896	13	and	and	CCONJ
fuelectenerg-900	896	14	a.	a.	NOUN
fuelectenerg-900	896	15	m.	m.	NOUN
fuelectenerg-900	896	16	ionescu	ionescu	PROPN
fuelectenerg-900	896	17	,	,	PUNCT
fuelectenerg-900	896	18	"	"	PUNCT
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fuelectenerg-900	896	21	resonators	resonator	NOUN
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fuelectenerg-900	896	32	"	"	PUNCT
fuelectenerg-900	896	33	,	,	PUNCT
fuelectenerg-900	896	34	acs	acs	PROPN
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fuelectenerg-900	896	41	pp	pp	ADJ
fuelectenerg-900	896	42	.	.	PUNCT
fuelectenerg-900	897	1	256–264	256–264	NUM
fuelectenerg-900	897	2	,	,	PUNCT
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fuelectenerg-900	897	4	.	.	PUNCT
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fuelectenerg-900	898	2	87	87	NUM
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fuelectenerg-900	898	12	a.	a.	NOUN
fuelectenerg-900	898	13	m.	m.	PROPN
fuelectenerg-900	898	14	jayich	jayich	PROPN
fuelectenerg-900	898	15	,	,	PUNCT
fuelectenerg-900	898	16	c.	c.	PROPN
fuelectenerg-900	898	17	yang	yang	PROPN
fuelectenerg-900	898	18	,	,	PUNCT
fuelectenerg-900	898	19	a.	a.	PROPN
fuelectenerg-900	898	20	c.	c.	PROPN
fuelectenerg-900	898	21	bleszynski	bleszynski	PROPN
fuelectenerg-900	898	22	jayich	jayich	PROPN
fuelectenerg-900	898	23	,	,	PUNCT
fuelectenerg-900	898	24	j.	j.	PROPN
fuelectenerg-900	898	25	d.	d.	PROPN
fuelectenerg-900	898	26	thompson	thompson	PROPN
fuelectenerg-900	898	27	and	and	CCONJ
fuelectenerg-900	898	28	j.	j.	PROPN
fuelectenerg-900	898	29	g.	g.	PROPN
fuelectenerg-900	898	30	e.	e.	PROPN
fuelectenerg-900	898	31	harris	harris	PROPN
fuelectenerg-900	898	32	,	,	PUNCT
fuelectenerg-900	898	33	"	"	PUNCT
fuelectenerg-900	898	34	high	high	ADJ
fuelectenerg-900	898	35	quality	quality	NOUN
fuelectenerg-900	898	36	mechanical	mechanical	ADJ
fuelectenerg-900	898	37	and	and	CCONJ
fuelectenerg-900	898	38	optical	optical	ADJ
fuelectenerg-900	898	39	properties	property	NOUN
fuelectenerg-900	898	40	of	of	ADP
fuelectenerg-900	898	41	commercial	commercial	ADJ
fuelectenerg-900	898	42	silicon	silicon	NOUN
fuelectenerg-900	898	43	nitride	nitride	ADJ
fuelectenerg-900	898	44	membranes	membrane	NOUN
fuelectenerg-900	898	45	,	,	PUNCT
fuelectenerg-900	898	46	appl	appl	NOUN
fuelectenerg-900	898	47	.	.	PUNCT
fuelectenerg-900	899	1	phys	phy	NOUN
fuelectenerg-900	899	2	.	.	PUNCT
fuelectenerg-900	900	1	lett	lett	PROPN
fuelectenerg-900	900	2	.	.	PROPN
fuelectenerg-900	900	3	,	,	PUNCT
fuelectenerg-900	900	4	vol	vol	NOUN
fuelectenerg-900	900	5	.	.	PROPN
fuelectenerg-900	901	1	92	92	NUM
fuelectenerg-900	901	2	,	,	PUNCT
fuelectenerg-900	901	3	pp	pp	ADJ
fuelectenerg-900	901	4	.	.	PUNCT
fuelectenerg-900	902	1	103125	103125	NUM
fuelectenerg-900	902	2	1	1	NUM
fuelectenerg-900	902	3	-	-	SYM
fuelectenerg-900	902	4	3	3	NUM
fuelectenerg-900	902	5	,	,	PUNCT
fuelectenerg-900	902	6	2008	2008	NUM
fuelectenerg-900	902	7	.	.	PUNCT
fuelectenerg-900	903	1	[	[	X
fuelectenerg-900	903	2	88	88	NUM
fuelectenerg-900	903	3	]	]	PUNCT
fuelectenerg-900	903	4	s.	s.	PROPN
fuelectenerg-900	903	5	iijima	iijima	PROPN
fuelectenerg-900	903	6	,	,	PUNCT
fuelectenerg-900	903	7	"	"	PUNCT
fuelectenerg-900	903	8	helical	helical	ADJ
fuelectenerg-900	903	9	microtubules	microtubule	NOUN
fuelectenerg-900	903	10	of	of	ADP
fuelectenerg-900	903	11	graphitic	graphitic	ADJ
fuelectenerg-900	903	12	carbon	carbon	NOUN
fuelectenerg-900	903	13	"	"	PUNCT
fuelectenerg-900	903	14	,	,	PUNCT
fuelectenerg-900	903	15	nature	nature	NOUN
fuelectenerg-900	903	16	,	,	PUNCT
fuelectenerg-900	903	17	vol	vol	NOUN
fuelectenerg-900	903	18	.	.	PROPN
fuelectenerg-900	903	19	354	354	NUM
fuelectenerg-900	903	20	,	,	PUNCT
fuelectenerg-900	903	21	pp	pp	ADJ
fuelectenerg-900	903	22	.	.	PUNCT
fuelectenerg-900	904	1	56	56	NUM
fuelectenerg-900	904	2	-	-	SYM
fuelectenerg-900	904	3	58	58	NUM
fuelectenerg-900	904	4	,	,	PUNCT
fuelectenerg-900	904	5	1991	1991	NUM
fuelectenerg-900	904	6	.	.	PUNCT
fuelectenerg-900	905	1	[	[	X
fuelectenerg-900	905	2	89	89	NUM
fuelectenerg-900	905	3	]	]	PUNCT
fuelectenerg-900	905	4	s.	s.	PROPN
fuelectenerg-900	905	5	m.	m.	PROPN
fuelectenerg-900	905	6	huang	huang	PROPN
fuelectenerg-900	905	7	,	,	PUNCT
fuelectenerg-900	905	8	x.	x.	PROPN
fuelectenerg-900	905	9	y.	y.	PROPN
fuelectenerg-900	905	10	cai	cai	PROPN
fuelectenerg-900	905	11	and	and	CCONJ
fuelectenerg-900	905	12	j.	j.	PROPN
fuelectenerg-900	905	13	liu	liu	PROPN
fuelectenerg-900	905	14	,	,	PUNCT
fuelectenerg-900	905	15	"	"	PUNCT
fuelectenerg-900	905	16	growth	growth	NOUN
fuelectenerg-900	905	17	of	of	ADP
fuelectenerg-900	905	18	millimeter	millimeter	NOUN
fuelectenerg-900	905	19	-	-	PUNCT
fuelectenerg-900	905	20	long	long	ADJ
fuelectenerg-900	905	21	and	and	CCONJ
fuelectenerg-900	905	22	horizontally	horizontally	ADV
fuelectenerg-900	905	23	aligned	align	VERB
fuelectenerg-900	905	24	singlewalled	singlewalle	VERB
fuelectenerg-900	905	25	carbon	carbon	NOUN
fuelectenerg-900	905	26	nanotubes	nanotube	NOUN
fuelectenerg-900	905	27	on	on	ADP
fuelectenerg-900	905	28	flat	flat	ADJ
fuelectenerg-900	905	29	substrates	substrate	NOUN
fuelectenerg-900	905	30	"	"	PUNCT
fuelectenerg-900	905	31	,	,	PUNCT
fuelectenerg-900	905	32	j.	j.	PROPN
fuelectenerg-900	905	33	amer	amer	PROPN
fuelectenerg-900	905	34	.	.	PROPN
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fuelectenerg-900	905	36	.	.	PUNCT
fuelectenerg-900	906	1	soc	soc	PROPN
fuelectenerg-900	906	2	.	.	PUNCT
fuelectenerg-900	907	1	,	,	PUNCT
fuelectenerg-900	907	2	vol	vol	NOUN
fuelectenerg-900	907	3	.	.	PROPN
fuelectenerg-900	907	4	125	125	NUM
fuelectenerg-900	907	5	,	,	PUNCT
fuelectenerg-900	907	6	pp	pp	ADJ
fuelectenerg-900	907	7	.	.	PUNCT
fuelectenerg-900	908	1	5636	5636	NUM
fuelectenerg-900	908	2	-	-	SYM
fuelectenerg-900	908	3	5637	5637	NUM
fuelectenerg-900	908	4	,	,	PUNCT
fuelectenerg-900	908	5	2003	2003	NUM
fuelectenerg-900	908	6	.	.	PUNCT
fuelectenerg-900	909	1	[	[	X
fuelectenerg-900	909	2	90	90	NUM
fuelectenerg-900	909	3	]	]	PUNCT
fuelectenerg-900	909	4	h.	h.	PROPN
fuelectenerg-900	909	5	w.	w.	PROPN
fuelectenerg-900	909	6	zhu	zhu	PROPN
fuelectenerg-900	909	7	,	,	PUNCT
fuelectenerg-900	909	8	c.	c.	PROPN
fuelectenerg-900	909	9	l.	l.	PROPN
fuelectenerg-900	909	10	xu	xu	PROPN
fuelectenerg-900	909	11	,	,	PUNCT
fuelectenerg-900	909	12	d.	d.	PROPN
fuelectenerg-900	909	13	h.	h.	PROPN
fuelectenerg-900	909	14	wu	wu	PROPN
fuelectenerg-900	909	15	,	,	PUNCT
fuelectenerg-900	909	16	b.	b.	PROPN
fuelectenerg-900	909	17	q.	q.	PROPN
fuelectenerg-900	909	18	wei	wei	PROPN
fuelectenerg-900	909	19	,	,	PUNCT
fuelectenerg-900	909	20	r.	r.	PROPN
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fuelectenerg-900	909	22	and	and	CCONJ
fuelectenerg-900	909	23	p.	p.	NOUN
fuelectenerg-900	909	24	m.	m.	NOUN
fuelectenerg-900	909	25	ajayan	ajayan	PROPN
fuelectenerg-900	909	26	,	,	PUNCT
fuelectenerg-900	909	27	"	"	PUNCT
fuelectenerg-900	909	28	direct	direct	ADJ
fuelectenerg-900	909	29	synthesis	synthesis	NOUN
fuelectenerg-900	909	30	of	of	ADP
fuelectenerg-900	909	31	long	long	ADJ
fuelectenerg-900	909	32	single	single	ADJ
fuelectenerg-900	909	33	-	-	PUNCT
fuelectenerg-900	909	34	walled	wall	VERB
fuelectenerg-900	909	35	carbon	carbon	NOUN
fuelectenerg-900	909	36	nanotube	nanotube	NOUN
fuelectenerg-900	909	37	strands	strand	NOUN
fuelectenerg-900	909	38	"	"	PUNCT
fuelectenerg-900	909	39	,	,	PUNCT
fuelectenerg-900	909	40	science	science	NOUN
fuelectenerg-900	909	41	,	,	PUNCT
fuelectenerg-900	909	42	vol	vol	NOUN
fuelectenerg-900	909	43	.	.	PROPN
fuelectenerg-900	909	44	296	296	NUM
fuelectenerg-900	909	45	,	,	PUNCT
fuelectenerg-900	909	46	pp	pp	PROPN
fuelectenerg-900	909	47	.	.	PUNCT
fuelectenerg-900	909	48	884	884	NUM
fuelectenerg-900	909	49	-	-	SYM
fuelectenerg-900	909	50	886	886	NUM
fuelectenerg-900	909	51	,	,	PUNCT
fuelectenerg-900	909	52	2002	2002	NUM
fuelectenerg-900	909	53	.	.	PUNCT
fuelectenerg-900	910	1	[	[	X
fuelectenerg-900	910	2	91	91	X
fuelectenerg-900	910	3	]	]	PUNCT
fuelectenerg-900	910	4	p.	p.	NOUN
fuelectenerg-900	910	5	poncharal	poncharal	PROPN
fuelectenerg-900	910	6	,	,	PUNCT
fuelectenerg-900	910	7	z.	z.	PROPN
fuelectenerg-900	910	8	l.	l.	PROPN
fuelectenerg-900	910	9	wang	wang	PROPN
fuelectenerg-900	910	10	,	,	PUNCT
fuelectenerg-900	910	11	d.	d.	PROPN
fuelectenerg-900	910	12	ugarte	ugarte	PROPN
fuelectenerg-900	910	13	and	and	CCONJ
fuelectenerg-900	910	14	w.	w.	PROPN
fuelectenerg-900	910	15	a.	a.	PROPN
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fuelectenerg-900	910	18	,	,	PUNCT
fuelectenerg-900	910	19	"	"	PUNCT
fuelectenerg-900	910	20	electrostatic	electrostatic	ADJ
fuelectenerg-900	910	21	deflections	deflection	NOUN
fuelectenerg-900	910	22	and	and	CCONJ
fuelectenerg-900	910	23	electromechanical	electromechanical	ADJ
fuelectenerg-900	910	24	resonances	resonance	NOUN
fuelectenerg-900	910	25	of	of	ADP
fuelectenerg-900	910	26	carbon	carbon	NOUN
fuelectenerg-900	910	27	nanotubes	nanotube	NOUN
fuelectenerg-900	910	28	"	"	PUNCT
fuelectenerg-900	910	29	,	,	PUNCT
fuelectenerg-900	910	30	science	science	NOUN
fuelectenerg-900	910	31	,	,	PUNCT
fuelectenerg-900	910	32	vol	vol	NOUN
fuelectenerg-900	910	33	.	.	PROPN
fuelectenerg-900	911	1	283	283	NUM
fuelectenerg-900	911	2	,	,	PUNCT
fuelectenerg-900	911	3	pp	pp	ADJ
fuelectenerg-900	911	4	.	.	PUNCT
fuelectenerg-900	912	1	1513	1513	NUM
fuelectenerg-900	912	2	-	-	SYM
fuelectenerg-900	912	3	1516	1516	NUM
fuelectenerg-900	912	4	,	,	PUNCT
fuelectenerg-900	912	5	1999	1999	NUM
fuelectenerg-900	912	6	.	.	PUNCT
fuelectenerg-900	913	1	[	[	X
fuelectenerg-900	913	2	92	92	NUM
fuelectenerg-900	913	3	]	]	PUNCT
fuelectenerg-900	913	4	v.	v.	ADP
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fuelectenerg-900	913	6	,	,	PUNCT
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fuelectenerg-900	913	9	,	,	PUNCT
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fuelectenerg-900	913	12	,	,	PUNCT
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fuelectenerg-900	913	15	,	,	PUNCT
fuelectenerg-900	913	16	t.	t.	PROPN
fuelectenerg-900	913	17	a.	a.	NOUN
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fuelectenerg-900	913	19	and	and	CCONJ
fuelectenerg-900	913	20	p.	p.	PROPN
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fuelectenerg-900	913	23	,	,	PUNCT
fuelectenerg-900	913	24	"	"	PUNCT
fuelectenerg-900	913	25	a	a	DET
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fuelectenerg-900	913	28	nanotube	nanotube	ADJ
fuelectenerg-900	913	29	electromechanical	electromechanical	ADJ
fuelectenerg-900	913	30	oscillator	oscillator	NOUN
fuelectenerg-900	913	31	"	"	PUNCT
fuelectenerg-900	913	32	,	,	PUNCT
fuelectenerg-900	913	33	nature	nature	NOUN
fuelectenerg-900	913	34	,	,	PUNCT
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fuelectenerg-900	913	36	.	.	PROPN
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fuelectenerg-900	913	38	,	,	PUNCT
fuelectenerg-900	913	39	pp	pp	ADJ
fuelectenerg-900	913	40	.	.	PUNCT
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fuelectenerg-900	913	42	-	-	SYM
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fuelectenerg-900	913	44	,	,	PUNCT
fuelectenerg-900	913	45	2004	2004	NUM
fuelectenerg-900	913	46	.	.	PUNCT
fuelectenerg-900	914	1	[	[	X
fuelectenerg-900	914	2	93	93	NUM
fuelectenerg-900	914	3	]	]	X
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fuelectenerg-900	914	6	,	,	PUNCT
fuelectenerg-900	914	7	"	"	PUNCT
fuelectenerg-900	914	8	a	a	DET
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fuelectenerg-900	914	10	carbon	carbon	NOUN
fuelectenerg-900	914	11	nanotube	nanotube	NOUN
fuelectenerg-900	914	12	resonator	resonator	NOUN
fuelectenerg-900	914	13	"	"	PUNCT
fuelectenerg-900	914	14	,	,	PUNCT
fuelectenerg-900	914	15	phd	phd	PROPN
fuelectenerg-900	914	16	.	.	PUNCT
fuelectenerg-900	915	1	thesis	thesis	PROPN
fuelectenerg-900	915	2	,	,	PUNCT
fuelectenerg-900	915	3	cornell	cornell	PROPN
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fuelectenerg-900	915	5	,	,	PUNCT
fuelectenerg-900	915	6	2006	2006	NUM
fuelectenerg-900	915	7	.	.	PUNCT
fuelectenerg-900	916	1	[	[	X
fuelectenerg-900	916	2	94	94	X
fuelectenerg-900	916	3	]	]	X
fuelectenerg-900	916	4	h.	h.	PROPN
fuelectenerg-900	916	5	b.	b.	PROPN
fuelectenerg-900	916	6	peng	peng	PROPN
fuelectenerg-900	916	7	,	,	PUNCT
fuelectenerg-900	916	8	c.	c.	PROPN
fuelectenerg-900	916	9	w.	w.	PROPN
fuelectenerg-900	916	10	chang	chang	PROPN
fuelectenerg-900	916	11	,	,	PUNCT
fuelectenerg-900	916	12	s.	s.	PROPN
fuelectenerg-900	916	13	aloni	aloni	PROPN
fuelectenerg-900	916	14	,	,	PUNCT
fuelectenerg-900	916	15	t.	t.	PROPN
fuelectenerg-900	916	16	d.	d.	PROPN
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fuelectenerg-900	916	18	and	and	CCONJ
fuelectenerg-900	916	19	a.	a.	NOUN
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fuelectenerg-900	916	22	"	"	PUNCT
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fuelectenerg-900	916	25	nanotube	nanotube	NOUN
fuelectenerg-900	916	26	resonators	resonator	NOUN
fuelectenerg-900	916	27	"	"	PUNCT
fuelectenerg-900	916	28	,	,	PUNCT
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fuelectenerg-900	916	30	.	.	PUNCT
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fuelectenerg-900	917	2	.	.	PROPN
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fuelectenerg-900	917	4	.	.	PROPN
fuelectenerg-900	917	5	,	,	PUNCT
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fuelectenerg-900	917	7	.	.	PROPN
fuelectenerg-900	918	1	97	97	NUM
fuelectenerg-900	918	2	,	,	PUNCT
fuelectenerg-900	918	3	pp	pp	ADJ
fuelectenerg-900	918	4	.	.	PUNCT
fuelectenerg-900	919	1	087203	087203	NUM
fuelectenerg-900	919	2	1	1	NUM
fuelectenerg-900	919	3	-	-	SYM
fuelectenerg-900	919	4	4	4	NUM
fuelectenerg-900	919	5	,	,	PUNCT
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fuelectenerg-900	919	7	.	.	PUNCT
fuelectenerg-900	920	1	[	[	X
fuelectenerg-900	920	2	95	95	NUM
fuelectenerg-900	920	3	]	]	X
fuelectenerg-900	920	4	d.	d.	PROPN
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fuelectenerg-900	920	6	-	-	PUNCT
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fuelectenerg-900	920	8	,	,	PUNCT
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fuelectenerg-900	920	13	m.	m.	PROPN
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fuelectenerg-900	920	21	,	,	PUNCT
fuelectenerg-900	920	22	l.	l.	PROPN
fuelectenerg-900	920	23	forró	forró	PROPN
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fuelectenerg-900	920	26	aguasca	aguasca	PROPN
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fuelectenerg-900	920	28	a.	a.	NOUN
fuelectenerg-900	920	29	bachtold	bachtold	NOUN
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fuelectenerg-900	920	31	"	"	PUNCT
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fuelectenerg-900	920	33	detection	detection	NOUN
fuelectenerg-900	920	34	of	of	ADP
fuelectenerg-900	920	35	carbon	carbon	NOUN
fuelectenerg-900	920	36	nanotube	nanotube	NOUN
fuelectenerg-900	920	37	resonator	resonator	NOUN
fuelectenerg-900	920	38	vibrations	vibration	NOUN
fuelectenerg-900	920	39	"	"	PUNCT
fuelectenerg-900	920	40	,	,	PUNCT
fuelectenerg-900	920	41	phys	phy	NOUN
fuelectenerg-900	920	42	.	.	PUNCT
fuelectenerg-900	920	43	rev	rev	PROPN
fuelectenerg-900	920	44	.	.	PROPN
fuelectenerg-900	920	45	lett	lett	PROPN
fuelectenerg-900	920	46	.	.	PROPN
fuelectenerg-900	920	47	,	,	PUNCT
fuelectenerg-900	920	48	vol	vol	NOUN
fuelectenerg-900	920	49	.	.	PROPN
fuelectenerg-900	921	1	99	99	NUM
fuelectenerg-900	921	2	,	,	PUNCT
fuelectenerg-900	921	3	pp	pp	ADJ
fuelectenerg-900	921	4	.	.	PUNCT
fuelectenerg-900	922	1	085501	085501	NUM
fuelectenerg-900	922	2	1	1	NUM
fuelectenerg-900	922	3	-	-	SYM
fuelectenerg-900	922	4	4	4	NUM
fuelectenerg-900	922	5	,	,	PUNCT
fuelectenerg-900	922	6	2007	2007	NUM
fuelectenerg-900	922	7	.	.	PUNCT
fuelectenerg-900	923	1	[	[	X
fuelectenerg-900	923	2	96	96	NUM
fuelectenerg-900	923	3	]	]	X
fuelectenerg-900	923	4	e.	e.	PROPN
fuelectenerg-900	923	5	a.	a.	PROPN
fuelectenerg-900	923	6	laird	laird	PROPN
fuelectenerg-900	923	7	,	,	PUNCT
fuelectenerg-900	923	8	f.	f.	PROPN
fuelectenerg-900	923	9	pei	pei	PROPN
fuelectenerg-900	923	10	,	,	PUNCT
fuelectenerg-900	923	11	w.	w.	PROPN
fuelectenerg-900	923	12	tang	tang	PROPN
fuelectenerg-900	923	13	,	,	PUNCT
fuelectenerg-900	923	14	g.	g.	PROPN
fuelectenerg-900	923	15	a.	a.	PROPN
fuelectenerg-900	923	16	steele	steele	PROPN
fuelectenerg-900	923	17	and	and	CCONJ
fuelectenerg-900	923	18	l.	l.	PROPN
fuelectenerg-900	923	19	p.	p.	PROPN
fuelectenerg-900	923	20	kouwenhoven	kouwenhoven	PROPN
fuelectenerg-900	923	21	,	,	PUNCT
fuelectenerg-900	923	22	"	"	PUNCT
fuelectenerg-900	923	23	a	a	DET
fuelectenerg-900	923	24	high	high	ADJ
fuelectenerg-900	923	25	quality	quality	NOUN
fuelectenerg-900	923	26	factor	factor	NOUN
fuelectenerg-900	923	27	carbon	carbon	NOUN
fuelectenerg-900	923	28	nanotube	nanotube	NOUN
fuelectenerg-900	923	29	mechanical	mechanical	ADJ
fuelectenerg-900	923	30	resonator	resonator	NOUN
fuelectenerg-900	923	31	at	at	ADP
fuelectenerg-900	923	32	39	39	NUM
fuelectenerg-900	923	33	ghz	ghz	NOUN
fuelectenerg-900	923	34	"	"	PUNCT
fuelectenerg-900	923	35	,	,	PUNCT
fuelectenerg-900	923	36	nano	nano	NOUN
fuelectenerg-900	923	37	lett	lett	PROPN
fuelectenerg-900	923	38	.	.	PUNCT
fuelectenerg-900	923	39	,	,	PUNCT
fuelectenerg-900	923	40	vol	vol	NOUN
fuelectenerg-900	923	41	.	.	PROPN
fuelectenerg-900	923	42	12	12	NUM
fuelectenerg-900	923	43	,	,	PUNCT
fuelectenerg-900	923	44	pp	pp	ADJ
fuelectenerg-900	923	45	.	.	PUNCT
fuelectenerg-900	924	1	193–197	193–197	NUM
fuelectenerg-900	924	2	,	,	PUNCT
fuelectenerg-900	924	3	2011	2011	NUM
fuelectenerg-900	924	4	.	.	PUNCT
fuelectenerg-900	925	1	[	[	X
fuelectenerg-900	925	2	97	97	NUM
fuelectenerg-900	925	3	]	]	X
fuelectenerg-900	925	4	chung	chung	PROPN
fuelectenerg-900	925	5	-	-	PUNCT
fuelectenerg-900	925	6	chiang	chiang	PROPN
fuelectenerg-900	925	7	wu	wu	PROPN
fuelectenerg-900	925	8	,	,	PUNCT
fuelectenerg-900	925	9	"	"	PUNCT
fuelectenerg-900	925	10	carbon	carbon	NOUN
fuelectenerg-900	925	11	based	base	VERB
fuelectenerg-900	925	12	nanoelectromechanical	nanoelectromechanical	ADJ
fuelectenerg-900	925	13	resonators	resonator	NOUN
fuelectenerg-900	925	14	"	"	PUNCT
fuelectenerg-900	925	15	,	,	PUNCT
fuelectenerg-900	925	16	phd	phd	NOUN
fuelectenerg-900	925	17	.	.	PUNCT
fuelectenerg-900	926	1	thesis	thesis	PROPN
fuelectenerg-900	926	2	,	,	PUNCT
fuelectenerg-900	926	3	university	university	PROPN
fuelectenerg-900	926	4	of	of	ADP
fuelectenerg-900	926	5	michigan	michigan	PROPN
fuelectenerg-900	926	6	,	,	PUNCT
fuelectenerg-900	926	7	2012	2012	NUM
fuelectenerg-900	926	8	.	.	PUNCT
fuelectenerg-900	927	1	[	[	X
fuelectenerg-900	927	2	98	98	NUM
fuelectenerg-900	927	3	]	]	X
fuelectenerg-900	927	4	m.	m.	NOUN
fuelectenerg-900	927	5	imboden	imboden	PROPN
fuelectenerg-900	927	6	and	and	CCONJ
fuelectenerg-900	927	7	p.	p.	NOUN
fuelectenerg-900	927	8	mohanty	mohanty	PROPN
fuelectenerg-900	927	9	,	,	PUNCT
fuelectenerg-900	927	10	"	"	PUNCT
fuelectenerg-900	927	11	dissipation	dissipation	NOUN
fuelectenerg-900	927	12	in	in	ADP
fuelectenerg-900	927	13	nanoelectromechanical	nanoelectromechanical	ADJ
fuelectenerg-900	927	14	systems	system	NOUN
fuelectenerg-900	927	15	"	"	PUNCT
fuelectenerg-900	927	16	,	,	PUNCT
fuelectenerg-900	927	17	physics	physics	NOUN
fuelectenerg-900	927	18	reports	report	NOUN
fuelectenerg-900	927	19	,	,	PUNCT
fuelectenerg-900	927	20	vol	vol	NOUN
fuelectenerg-900	927	21	.	.	PROPN
fuelectenerg-900	928	1	534	534	NUM
fuelectenerg-900	928	2	,	,	PUNCT
fuelectenerg-900	928	3	pp	pp	ADJ
fuelectenerg-900	928	4	.	.	PUNCT
fuelectenerg-900	929	1	89–146	89–146	NUM
fuelectenerg-900	929	2	,	,	PUNCT
fuelectenerg-900	929	3	2014	2014	NUM
fuelectenerg-900	929	4	.	.	PUNCT
fuelectenerg-900	930	1	[	[	X
fuelectenerg-900	930	2	99	99	NUM
fuelectenerg-900	930	3	]	]	PUNCT
fuelectenerg-900	930	4	b.	b.	PROPN
fuelectenerg-900	930	5	lassagne	lassagne	PROPN
fuelectenerg-900	930	6	,	,	PUNCT
fuelectenerg-900	930	7	d.	d.	PROPN
fuelectenerg-900	930	8	garcia	garcia	PROPN
fuelectenerg-900	930	9	-	-	PUNCT
fuelectenerg-900	930	10	sanchez	sanchez	PROPN
fuelectenerg-900	930	11	,	,	PUNCT
fuelectenerg-900	930	12	a.	a.	PROPN
fuelectenerg-900	930	13	aguasca	aguasca	PROPN
fuelectenerg-900	930	14	and	and	CCONJ
fuelectenerg-900	930	15	a.	a.	NOUN
fuelectenerg-900	930	16	bachtold	bachtold	NOUN
fuelectenerg-900	930	17	,	,	PUNCT
fuelectenerg-900	930	18	"	"	PUNCT
fuelectenerg-900	930	19	ultrasensitive	ultrasensitive	ADJ
fuelectenerg-900	930	20	mass	mass	NOUN
fuelectenerg-900	930	21	sensing	sense	VERB
fuelectenerg-900	930	22	with	with	ADP
fuelectenerg-900	930	23	a	a	DET
fuelectenerg-900	930	24	nanotube	nanotube	ADJ
fuelectenerg-900	930	25	electromechanical	electromechanical	ADJ
fuelectenerg-900	930	26	resonator	resonator	NOUN
fuelectenerg-900	930	27	"	"	PUNCT
fuelectenerg-900	930	28	,	,	PUNCT
fuelectenerg-900	930	29	nano	nano	NOUN
fuelectenerg-900	930	30	lett	lett	PROPN
fuelectenerg-900	930	31	.	.	PUNCT
fuelectenerg-900	930	32	,	,	PUNCT
fuelectenerg-900	930	33	vol	vol	NOUN
fuelectenerg-900	930	34	.	.	PROPN
fuelectenerg-900	930	35	8	8	NUM
fuelectenerg-900	930	36	,	,	PUNCT
fuelectenerg-900	930	37	pp	pp	ADJ
fuelectenerg-900	930	38	.	.	PUNCT
fuelectenerg-900	931	1	3735–3738	3735–3738	NUM
fuelectenerg-900	931	2	,	,	PUNCT
fuelectenerg-900	931	3	2008	2008	NUM
fuelectenerg-900	931	4	.	.	PUNCT
fuelectenerg-900	932	1	[	[	X
fuelectenerg-900	932	2	100	100	NUM
fuelectenerg-900	932	3	]	]	PUNCT
fuelectenerg-900	932	4	a.	a.	NOUN
fuelectenerg-900	932	5	huttel	huttel	PROPN
fuelectenerg-900	932	6	,	,	PUNCT
fuelectenerg-900	932	7	g.	g.	PROPN
fuelectenerg-900	932	8	steele	steele	PROPN
fuelectenerg-900	932	9	,	,	PUNCT
fuelectenerg-900	932	10	b.	b.	PROPN
fuelectenerg-900	932	11	witkamp	witkamp	PROPN
fuelectenerg-900	932	12	,	,	PUNCT
fuelectenerg-900	932	13	m.	m.	NOUN
fuelectenerg-900	932	14	poot	poot	NOUN
fuelectenerg-900	932	15	,	,	PUNCT
fuelectenerg-900	932	16	l.	l.	PROPN
fuelectenerg-900	932	17	kouwenhoven	kouwenhoven	PROPN
fuelectenerg-900	932	18	and	and	CCONJ
fuelectenerg-900	932	19	h.	h.	PROPN
fuelectenerg-900	932	20	van	van	PROPN
fuelectenerg-900	932	21	der	der	PROPN
fuelectenerg-900	932	22	zant	zant	PROPN
fuelectenerg-900	932	23	,	,	PUNCT
fuelectenerg-900	932	24	"	"	PUNCT
fuelectenerg-900	932	25	carbon	carbon	NOUN
fuelectenerg-900	932	26	nanotubes	nanotube	NOUN
fuelectenerg-900	932	27	as	as	ADP
fuelectenerg-900	932	28	ultrahigh	ultrahigh	ADJ
fuelectenerg-900	932	29	quality	quality	NOUN
fuelectenerg-900	932	30	factor	factor	NOUN
fuelectenerg-900	932	31	mechanical	mechanical	ADJ
fuelectenerg-900	932	32	resonators	resonator	NOUN
fuelectenerg-900	932	33	"	"	PUNCT
fuelectenerg-900	932	34	,	,	PUNCT
fuelectenerg-900	932	35	nano	nano	NOUN
fuelectenerg-900	932	36	lett	lett	PROPN
fuelectenerg-900	932	37	.	.	PUNCT
fuelectenerg-900	932	38	,	,	PUNCT
fuelectenerg-900	932	39	vol	vol	NOUN
fuelectenerg-900	932	40	.	.	PROPN
fuelectenerg-900	932	41	9	9	NUM
fuelectenerg-900	932	42	,	,	PUNCT
fuelectenerg-900	932	43	pp	pp	ADJ
fuelectenerg-900	932	44	.	.	PUNCT
fuelectenerg-900	932	45	2547–2552	2547–2552	NUM
fuelectenerg-900	932	46	,	,	PUNCT
fuelectenerg-900	932	47	2009	2009	NUM
fuelectenerg-900	932	48	.	.	PUNCT
fuelectenerg-900	933	1	[	[	X
fuelectenerg-900	933	2	101	101	NUM
fuelectenerg-900	933	3	]	]	PUNCT
fuelectenerg-900	933	4	benjamin	benjamin	PROPN
fuelectenerg-900	933	5	jose	jose	PROPN
fuelectenerg-900	933	6	aleman	aleman	PROPN
fuelectenerg-900	933	7	,	,	PUNCT
fuelectenerg-900	933	8	"	"	PUNCT
fuelectenerg-900	933	9	carbon	carbon	NOUN
fuelectenerg-900	933	10	nanotube	nanotube	NOUN
fuelectenerg-900	933	11	and	and	CCONJ
fuelectenerg-900	933	12	graphene	graphene	VERB
fuelectenerg-900	933	13	nanoelectromechanical	nanoelectromechanical	ADJ
fuelectenerg-900	933	14	systems	system	NOUN
fuelectenerg-900	933	15	"	"	PUNCT
fuelectenerg-900	933	16	,	,	PUNCT
fuelectenerg-900	933	17	phd	phd	NOUN
fuelectenerg-900	933	18	.	.	PUNCT
fuelectenerg-900	933	19	thesis	thesis	PROPN
fuelectenerg-900	933	20	,	,	PUNCT
fuelectenerg-900	933	21	university	university	PROPN
fuelectenerg-900	933	22	of	of	ADP
fuelectenerg-900	933	23	california	california	PROPN
fuelectenerg-900	933	24	,	,	PUNCT
fuelectenerg-900	933	25	berkeley	berkeley	PROPN
fuelectenerg-900	933	26	,	,	PUNCT
fuelectenerg-900	933	27	2011	2011	NUM
fuelectenerg-900	933	28	.	.	PUNCT
fuelectenerg-900	934	1	[	[	X
fuelectenerg-900	934	2	102	102	NUM
fuelectenerg-900	934	3	]	]	X
fuelectenerg-900	934	4	a.	a.	NOUN
fuelectenerg-900	934	5	k.	k.	PROPN
fuelectenerg-900	934	6	geim	geim	PROPN
fuelectenerg-900	934	7	,	,	PUNCT
fuelectenerg-900	934	8	k.	k.	PROPN
fuelectenerg-900	934	9	s.	s.	PROPN
fuelectenerg-900	934	10	novoselov	novoselov	PROPN
fuelectenerg-900	934	11	,	,	PUNCT
fuelectenerg-900	934	12	"	"	PUNCT
fuelectenerg-900	934	13	the	the	DET
fuelectenerg-900	934	14	rise	rise	NOUN
fuelectenerg-900	934	15	of	of	ADP
fuelectenerg-900	934	16	graphene	graphene	NOUN
fuelectenerg-900	934	17	"	"	PUNCT
fuelectenerg-900	934	18	,	,	PUNCT
fuelectenerg-900	934	19	nat	nat	PROPN
fuelectenerg-900	935	1	.	.	PUNCT
fuelectenerg-900	935	2	mater	mater	PROPN
fuelectenerg-900	935	3	.	.	PUNCT
fuelectenerg-900	936	1	,	,	PUNCT
fuelectenerg-900	936	2	vol	vol	NOUN
fuelectenerg-900	936	3	.	.	PROPN
fuelectenerg-900	936	4	6	6	NUM
fuelectenerg-900	936	5	,	,	PUNCT
fuelectenerg-900	936	6	pp	pp	ADJ
fuelectenerg-900	936	7	.	.	PUNCT
fuelectenerg-900	937	1	183–191	183–191	NUM
fuelectenerg-900	937	2	,	,	PUNCT
fuelectenerg-900	937	3	2007	2007	NUM
fuelectenerg-900	937	4	.	.	PUNCT
fuelectenerg-900	938	1	[	[	X
fuelectenerg-900	938	2	103	103	NUM
fuelectenerg-900	938	3	]	]	PUNCT
fuelectenerg-900	938	4	j.	j.	PROPN
fuelectenerg-900	938	5	s.	s.	PROPN
fuelectenerg-900	938	6	bunch	bunch	PROPN
fuelectenerg-900	938	7	,	,	PUNCT
fuelectenerg-900	938	8	a.	a.	NOUN
fuelectenerg-900	938	9	m.	m.	NOUN
fuelectenerg-900	938	10	van	van	PROPN
fuelectenerg-900	938	11	der	der	PROPN
fuelectenerg-900	938	12	zande	zande	NOUN
fuelectenerg-900	938	13	,	,	PUNCT
fuelectenerg-900	938	14	s.	s.	PROPN
fuelectenerg-900	938	15	s.	s.	PROPN
fuelectenerg-900	938	16	verbridge	verbridge	PROPN
fuelectenerg-900	938	17	,	,	PUNCT
fuelectenerg-900	938	18	i.	i.	PROPN
fuelectenerg-900	938	19	w.	w.	PROPN
fuelectenerg-900	938	20	frank	frank	PROPN
fuelectenerg-900	938	21	,	,	PUNCT
fuelectenerg-900	938	22	d.	d.	PROPN
fuelectenerg-900	938	23	m.	m.	PROPN
fuelectenerg-900	938	24	tanenbaum	tanenbaum	PROPN
fuelectenerg-900	938	25	,	,	PUNCT
fuelectenerg-900	938	26	j.	j.	PROPN
fuelectenerg-900	938	27	m.	m.	PROPN
fuelectenerg-900	938	28	parpia	parpia	PROPN
fuelectenerg-900	938	29	,	,	PUNCT
fuelectenerg-900	938	30	h.	h.	PROPN
fuelectenerg-900	938	31	g.	g.	PROPN
fuelectenerg-900	938	32	craighead	craighead	PROPN
fuelectenerg-900	938	33	and	and	CCONJ
fuelectenerg-900	938	34	p.	p.	PROPN
fuelectenerg-900	938	35	l.	l.	PROPN
fuelectenerg-900	938	36	mceuen	mceuen	PROPN
fuelectenerg-900	938	37	,	,	PUNCT
fuelectenerg-900	938	38	"	"	PUNCT
fuelectenerg-900	938	39	electromechanical	electromechanical	ADJ
fuelectenerg-900	938	40	resonators	resonator	NOUN
fuelectenerg-900	938	41	from	from	ADP
fuelectenerg-900	938	42	graphene	graphene	ADJ
fuelectenerg-900	938	43	sheets	sheet	NOUN
fuelectenerg-900	938	44	"	"	PUNCT
fuelectenerg-900	938	45	,	,	PUNCT
fuelectenerg-900	938	46	science	science	NOUN
fuelectenerg-900	938	47	,	,	PUNCT
fuelectenerg-900	938	48	vol	vol	NOUN
fuelectenerg-900	938	49	.	.	PROPN
fuelectenerg-900	938	50	315	315	NUM
fuelectenerg-900	938	51	,	,	PUNCT
fuelectenerg-900	938	52	pp	pp	ADJ
fuelectenerg-900	938	53	.	.	PUNCT
fuelectenerg-900	939	1	490	490	NUM
fuelectenerg-900	939	2	-	-	SYM
fuelectenerg-900	939	3	493	493	NUM
fuelectenerg-900	939	4	,	,	PUNCT
fuelectenerg-900	939	5	2007	2007	NUM
fuelectenerg-900	939	6	.	.	PUNCT
fuelectenerg-900	940	1	[	[	X
fuelectenerg-900	940	2	104	104	X
fuelectenerg-900	940	3	]	]	X
fuelectenerg-900	940	4	d.	d.	PROPN
fuelectenerg-900	940	5	garcia	garcia	PROPN
fuelectenerg-900	940	6	-	-	PUNCT
fuelectenerg-900	940	7	sanchez	sanchez	PROPN
fuelectenerg-900	940	8	,	,	PUNCT
fuelectenerg-900	940	9	a.	a.	PROPN
fuelectenerg-900	940	10	m.	m.	PROPN
fuelectenerg-900	940	11	van	van	PROPN
fuelectenerg-900	940	12	der	der	PROPN
fuelectenerg-900	940	13	zande	zande	NOUN
fuelectenerg-900	940	14	,	,	PUNCT
fuelectenerg-900	940	15	a.	a.	PROPN
fuelectenerg-900	940	16	san	san	PROPN
fuelectenerg-900	940	17	paulo	paulo	PROPN
fuelectenerg-900	940	18	,	,	PUNCT
fuelectenerg-900	940	19	b.	b.	PROPN
fuelectenerg-900	940	20	lassagne	lassagne	PROPN
fuelectenerg-900	940	21	,	,	PUNCT
fuelectenerg-900	940	22	p.	p.	PROPN
fuelectenerg-900	940	23	l.	l.	PROPN
fuelectenerg-900	940	24	mceuen	mceuen	PROPN
fuelectenerg-900	940	25	a.	a.	PROPN
fuelectenerg-900	940	26	bachtold	bachtold	NOUN
fuelectenerg-900	940	27	,	,	PUNCT
fuelectenerg-900	940	28	"	"	PUNCT
fuelectenerg-900	940	29	imaging	image	VERB
fuelectenerg-900	940	30	mechanical	mechanical	ADJ
fuelectenerg-900	940	31	vibrations	vibration	NOUN
fuelectenerg-900	940	32	in	in	ADP
fuelectenerg-900	940	33	suspended	suspend	VERB
fuelectenerg-900	940	34	graphene	graphene	NOUN
fuelectenerg-900	940	35	sheets	sheet	NOUN
fuelectenerg-900	940	36	"	"	PUNCT
fuelectenerg-900	940	37	,	,	PUNCT
fuelectenerg-900	940	38	nano	nano	NOUN
fuelectenerg-900	940	39	lett	lett	PROPN
fuelectenerg-900	940	40	.	.	PUNCT
fuelectenerg-900	940	41	,	,	PUNCT
fuelectenerg-900	940	42	vol	vol	NOUN
fuelectenerg-900	940	43	.	.	PROPN
fuelectenerg-900	940	44	8	8	NUM
fuelectenerg-900	940	45	,	,	PUNCT
fuelectenerg-900	940	46	pp	pp	ADJ
fuelectenerg-900	940	47	.	.	PUNCT
fuelectenerg-900	941	1	1399	1399	NUM
fuelectenerg-900	941	2	-	-	SYM
fuelectenerg-900	941	3	1403	1403	NUM
fuelectenerg-900	941	4	,	,	PUNCT
fuelectenerg-900	941	5	2008	2008	NUM
fuelectenerg-900	941	6	.	.	PUNCT
fuelectenerg-900	942	1	[	[	X
fuelectenerg-900	942	2	105	105	NUM
fuelectenerg-900	942	3	]	]	X
fuelectenerg-900	942	4	c.	c.	PROPN
fuelectenerg-900	942	5	y.	y.	PROPN
fuelectenerg-900	942	6	chen	chen	PROPN
fuelectenerg-900	942	7	,	,	PUNCT
fuelectenerg-900	942	8	s.	s.	PROPN
fuelectenerg-900	942	9	rosenblatt	rosenblatt	PROPN
fuelectenerg-900	942	10	,	,	PUNCT
fuelectenerg-900	942	11	k.	k.	PROPN
fuelectenerg-900	942	12	i.	i.	PROPN
fuelectenerg-900	942	13	bolotin	bolotin	PROPN
fuelectenerg-900	942	14	,	,	PUNCT
fuelectenerg-900	942	15	w.	w.	PROPN
fuelectenerg-900	942	16	kalb	kalb	PROPN
fuelectenerg-900	942	17	,	,	PUNCT
fuelectenerg-900	942	18	p.	p.	PROPN
fuelectenerg-900	942	19	kim	kim	PROPN
fuelectenerg-900	942	20	,	,	PUNCT
fuelectenerg-900	942	21	i.	i.	PROPN
fuelectenerg-900	942	22	kymissis	kymissis	PROPN
fuelectenerg-900	942	23	,	,	PUNCT
fuelectenerg-900	942	24	h.	h.	PROPN
fuelectenerg-900	942	25	l.	l.	PROPN
fuelectenerg-900	942	26	stormer	stormer	PROPN
fuelectenerg-900	942	27	,	,	PUNCT
fuelectenerg-900	942	28	t.	t.	PROPN
fuelectenerg-900	942	29	f.	f.	PROPN
fuelectenerg-900	942	30	heinz	heinz	PROPN
fuelectenerg-900	942	31	and	and	CCONJ
fuelectenerg-900	942	32	j.	j.	PROPN
fuelectenerg-900	942	33	hone	hone	PROPN
fuelectenerg-900	942	34	,	,	PUNCT
fuelectenerg-900	942	35	"	"	PUNCT
fuelectenerg-900	942	36	performance	performance	NOUN
fuelectenerg-900	942	37	of	of	ADP
fuelectenerg-900	942	38	monolayer	monolayer	NOUN
fuelectenerg-900	942	39	graphene	graphene	VERB
fuelectenerg-900	942	40	nanomechanical	nanomechanical	ADJ
fuelectenerg-900	942	41	resonators	resonator	NOUN
fuelectenerg-900	942	42	with	with	ADP
fuelectenerg-900	942	43	electrical	electrical	ADJ
fuelectenerg-900	942	44	readout	readout	NOUN
fuelectenerg-900	942	45	"	"	PUNCT
fuelectenerg-900	942	46	,	,	PUNCT
fuelectenerg-900	942	47	nat	nat	PROPN
fuelectenerg-900	942	48	.	.	PUNCT
fuelectenerg-900	942	49	nanotech	nanotech	PROPN
fuelectenerg-900	942	50	.	.	PROPN
fuelectenerg-900	942	51	,	,	PUNCT
fuelectenerg-900	942	52	vol	vol	NOUN
fuelectenerg-900	942	53	.	.	PROPN
fuelectenerg-900	943	1	4	4	NUM
fuelectenerg-900	943	2	,	,	PUNCT
fuelectenerg-900	943	3	pp	pp	ADJ
fuelectenerg-900	943	4	.	.	PUNCT
fuelectenerg-900	944	1	861	861	NUM
fuelectenerg-900	944	2	-	-	SYM
fuelectenerg-900	944	3	867	867	NUM
fuelectenerg-900	944	4	,	,	PUNCT
fuelectenerg-900	944	5	2009	2009	NUM
fuelectenerg-900	944	6	.	.	PUNCT
fuelectenerg-900	945	1	[	[	X
fuelectenerg-900	945	2	106	106	X
fuelectenerg-900	945	3	]	]	X
fuelectenerg-900	945	4	r.	r.	PROPN
fuelectenerg-900	945	5	a.	a.	PROPN
fuelectenerg-900	945	6	barton	barton	PROPN
fuelectenerg-900	945	7	,	,	PUNCT
fuelectenerg-900	945	8	b.	b.	PROPN
fuelectenerg-900	945	9	ilic	ilic	PROPN
fuelectenerg-900	945	10	,	,	PUNCT
fuelectenerg-900	945	11	a.	a.	NOUN
fuelectenerg-900	945	12	m.	m.	NOUN
fuelectenerg-900	945	13	van	van	PROPN
fuelectenerg-900	945	14	der	der	PROPN
fuelectenerg-900	945	15	zande	zande	NOUN
fuelectenerg-900	945	16	,	,	PUNCT
fuelectenerg-900	945	17	w.	w.	PROPN
fuelectenerg-900	945	18	s.	s.	PROPN
fuelectenerg-900	945	19	whitney	whitney	PROPN
fuelectenerg-900	945	20	,	,	PUNCT
fuelectenerg-900	945	21	p.	p.	PROPN
fuelectenerg-900	945	22	l.	l.	PROPN
fuelectenerg-900	945	23	mceuen	mceuen	PROPN
fuelectenerg-900	945	24	,	,	PUNCT
fuelectenerg-900	945	25	j.	j.	PROPN
fuelectenerg-900	945	26	m.	m.	PROPN
fuelectenerg-900	945	27	parpia	parpia	PROPN
fuelectenerg-900	945	28	and	and	CCONJ
fuelectenerg-900	945	29	h.	h.	PROPN
fuelectenerg-900	945	30	g.	g.	PROPN
fuelectenerg-900	945	31	craighead	craighead	PROPN
fuelectenerg-900	945	32	,	,	PUNCT
fuelectenerg-900	945	33	"	"	PUNCT
fuelectenerg-900	945	34	high	high	ADJ
fuelectenerg-900	945	35	,	,	PUNCT
fuelectenerg-900	945	36	size	size	NOUN
fuelectenerg-900	945	37	-	-	PUNCT
fuelectenerg-900	945	38	dependent	dependent	ADJ
fuelectenerg-900	945	39	quality	quality	NOUN
fuelectenerg-900	945	40	factor	factor	NOUN
fuelectenerg-900	945	41	in	in	ADP
fuelectenerg-900	945	42	an	an	DET
fuelectenerg-900	945	43	array	array	NOUN
fuelectenerg-900	945	44	of	of	ADP
fuelectenerg-900	945	45	graphene	graphene	ADJ
fuelectenerg-900	945	46	mechanical	mechanical	ADJ
fuelectenerg-900	945	47	resonators	resonator	NOUN
fuelectenerg-900	945	48	"	"	PUNCT
fuelectenerg-900	945	49	,	,	PUNCT
fuelectenerg-900	945	50	nano	nano	NOUN
fuelectenerg-900	945	51	lett	lett	PROPN
fuelectenerg-900	945	52	.	.	PUNCT
fuelectenerg-900	945	53	,	,	PUNCT
fuelectenerg-900	945	54	vol	vol	NOUN
fuelectenerg-900	945	55	.	.	PROPN
fuelectenerg-900	945	56	11	11	NUM
fuelectenerg-900	945	57	,	,	PUNCT
fuelectenerg-900	945	58	pp	pp	ADJ
fuelectenerg-900	945	59	.	.	PUNCT
fuelectenerg-900	946	1	1232–1236	1232–1236	NUM
fuelectenerg-900	946	2	,	,	PUNCT
fuelectenerg-900	946	3	2011	2011	NUM
fuelectenerg-900	946	4	.	.	PUNCT
fuelectenerg-900	947	1	[	[	X
fuelectenerg-900	947	2	107	107	X
fuelectenerg-900	947	3	]	]	X
fuelectenerg-900	947	4	y.	y.	PROPN
fuelectenerg-900	947	5	s.	s.	PROPN
fuelectenerg-900	947	6	greenberg	greenberg	PROPN
fuelectenerg-900	947	7	,	,	PUNCT
fuelectenerg-900	947	8	y.	y.	PROPN
fuelectenerg-900	947	9	a.	a.	NOUN
fuelectenerg-900	947	10	pashkin	pashkin	PROPN
fuelectenerg-900	947	11	and	and	CCONJ
fuelectenerg-900	947	12	e.	e.	PROPN
fuelectenerg-900	947	13	il'ichev	il'ichev	PROPN
fuelectenerg-900	947	14	,	,	PUNCT
fuelectenerg-900	947	15	"	"	PUNCT
fuelectenerg-900	947	16	nanomechanical	nanomechanical	ADJ
fuelectenerg-900	947	17	resonators	resonator	NOUN
fuelectenerg-900	947	18	"	"	PUNCT
fuelectenerg-900	947	19	,	,	PUNCT
fuelectenerg-900	947	20	physics	physics	PROPN
fuelectenerg-900	947	21	–	–	PUNCT
fuelectenerg-900	947	22	uspekhi	uspekhi	PROPN
fuelectenerg-900	947	23	,	,	PUNCT
fuelectenerg-900	947	24	vol	vol	NOUN
fuelectenerg-900	947	25	.	.	PROPN
fuelectenerg-900	948	1	55	55	NUM
fuelectenerg-900	948	2	,	,	PUNCT
fuelectenerg-900	948	3	pp	pp	ADJ
fuelectenerg-900	948	4	.	.	PUNCT
fuelectenerg-900	949	1	382	382	NUM
fuelectenerg-900	949	2	-	-	SYM
fuelectenerg-900	949	3	407	407	NUM
fuelectenerg-900	949	4	,	,	PUNCT
fuelectenerg-900	949	5	2012	2012	NUM
fuelectenerg-900	949	6	.	.	PUNCT
fuelectenerg-900	950	1	[	[	X
fuelectenerg-900	950	2	108	108	NUM
fuelectenerg-900	950	3	]	]	PUNCT
fuelectenerg-900	950	4	z.	z.	PROPN
fuelectenerg-900	950	5	djurić	djurić	PROPN
fuelectenerg-900	950	6	,	,	PUNCT
fuelectenerg-900	950	7	"	"	PUNCT
fuelectenerg-900	950	8	mechanisms	mechanism	NOUN
fuelectenerg-900	950	9	of	of	ADP
fuelectenerg-900	950	10	noise	noise	NOUN
fuelectenerg-900	950	11	sources	source	NOUN
fuelectenerg-900	950	12	in	in	ADP
fuelectenerg-900	950	13	microelectromechanical	microelectromechanical	ADJ
fuelectenerg-900	950	14	systems	system	NOUN
fuelectenerg-900	950	15	"	"	PUNCT
fuelectenerg-900	950	16	,	,	PUNCT
fuelectenerg-900	950	17	introductory	introductory	NOUN
fuelectenerg-900	950	18	invited	invite	VERB
fuelectenerg-900	950	19	paper	paper	NOUN
fuelectenerg-900	950	20	,	,	PUNCT
fuelectenerg-900	950	21	microelectron	microelectron	PROPN
fuelectenerg-900	950	22	.	.	PUNCT
fuelectenerg-900	951	1	reliab	reliab	PROPN
fuelectenerg-900	951	2	.	.	PUNCT
fuelectenerg-900	952	1	,	,	PUNCT
fuelectenerg-900	952	2	vol	vol	NOUN
fuelectenerg-900	952	3	.	.	PROPN
fuelectenerg-900	953	1	40	40	NUM
fuelectenerg-900	953	2	,	,	PUNCT
fuelectenerg-900	953	3	pp	pp	ADJ
fuelectenerg-900	953	4	.	.	PUNCT
fuelectenerg-900	954	1	919	919	NUM
fuelectenerg-900	954	2	-	-	SYM
fuelectenerg-900	954	3	932	932	NUM
fuelectenerg-900	954	4	,	,	PUNCT
fuelectenerg-900	954	5	2000	2000	NUM
fuelectenerg-900	954	6	.	.	PUNCT
fuelectenerg-900	955	1	[	[	X
fuelectenerg-900	955	2	109	109	NUM
fuelectenerg-900	955	3	]	]	PUNCT
fuelectenerg-900	955	4	f.	f.	PROPN
fuelectenerg-900	955	5	l.	l.	PROPN
fuelectenerg-900	955	6	walls	walls	PROPN
fuelectenerg-900	955	7	and	and	CCONJ
fuelectenerg-900	955	8	j.	j.	PROPN
fuelectenerg-900	955	9	r.	r.	PROPN
fuelectenerg-900	955	10	vig	vig	PROPN
fuelectenerg-900	955	11	,	,	PUNCT
fuelectenerg-900	955	12	"	"	PUNCT
fuelectenerg-900	955	13	fundamental	fundamental	ADJ
fuelectenerg-900	955	14	limits	limit	NOUN
fuelectenerg-900	955	15	on	on	ADP
fuelectenerg-900	955	16	the	the	DET
fuelectenerg-900	955	17	frequency	frequency	NOUN
fuelectenerg-900	955	18	stabilities	stability	NOUN
fuelectenerg-900	955	19	of	of	ADP
fuelectenerg-900	955	20	crystal	crystal	NOUN
fuelectenerg-900	955	21	oscillators	oscillator	NOUN
fuelectenerg-900	955	22	"	"	PUNCT
fuelectenerg-900	955	23	,	,	PUNCT
fuelectenerg-900	955	24	ieee	ieee	PROPN
fuelectenerg-900	955	25	trans	trans	PROPN
fuelectenerg-900	955	26	.	.	PUNCT
fuelectenerg-900	956	1	ultrason	ultrason	PROPN
fuelectenerg-900	956	2	.	.	PUNCT
fuelectenerg-900	957	1	ferroel	ferroel	PROPN
fuelectenerg-900	957	2	.	.	PUNCT
fuelectenerg-900	958	1	freq.control	freq.control	NOUN
fuelectenerg-900	958	2	,	,	PUNCT
fuelectenerg-900	958	3	vol	vol	NOUN
fuelectenerg-900	958	4	.	.	PROPN
fuelectenerg-900	958	5	42	42	NUM
fuelectenerg-900	958	6	,	,	PUNCT
fuelectenerg-900	958	7	pp	pp	ADJ
fuelectenerg-900	958	8	.	.	PUNCT
fuelectenerg-900	959	1	576	576	NUM
fuelectenerg-900	959	2	-	-	SYM
fuelectenerg-900	959	3	589	589	NUM
fuelectenerg-900	959	4	,	,	PUNCT
fuelectenerg-900	959	5	1995	1995	NUM
fuelectenerg-900	959	6	.	.	PUNCT
fuelectenerg-900	960	1	[	[	X
fuelectenerg-900	960	2	110	110	NUM
fuelectenerg-900	960	3	]	]	PUNCT
fuelectenerg-900	960	4	j.	j.	PROPN
fuelectenerg-900	960	5	r.	r.	PROPN
fuelectenerg-900	960	6	vig	vig	PROPN
fuelectenerg-900	960	7	and	and	CCONJ
fuelectenerg-900	960	8	y.	y.	PROPN
fuelectenerg-900	960	9	kim	kim	PROPN
fuelectenerg-900	960	10	,	,	PUNCT
fuelectenerg-900	960	11	"	"	PUNCT
fuelectenerg-900	960	12	noise	noise	NOUN
fuelectenerg-900	960	13	in	in	ADP
fuelectenerg-900	960	14	mems	mems	ADJ
fuelectenerg-900	960	15	resonators	resonator	NOUN
fuelectenerg-900	960	16	"	"	PUNCT
fuelectenerg-900	960	17	,	,	PUNCT
fuelectenerg-900	960	18	ieee	ieee	PROPN
fuelectenerg-900	960	19	trans	trans	PROPN
fuelectenerg-900	960	20	.	.	PUNCT
fuelectenerg-900	961	1	ultrason	ultrason	PROPN
fuelectenerg-900	961	2	.	.	PUNCT
fuelectenerg-900	962	1	ferroelect	ferroelect	PROPN
fuelectenerg-900	962	2	.	.	PUNCT
fuelectenerg-900	963	1	freq	freq	PROPN
fuelectenerg-900	963	2	.	.	PUNCT
fuelectenerg-900	964	1	control	control	NOUN
fuelectenerg-900	964	2	,	,	PUNCT
fuelectenerg-900	964	3	vol	vol	NOUN
fuelectenerg-900	964	4	.	.	PROPN
fuelectenerg-900	964	5	46	46	NUM
fuelectenerg-900	964	6	,	,	PUNCT
fuelectenerg-900	964	7	pp	pp	ADJ
fuelectenerg-900	964	8	.	.	PUNCT
fuelectenerg-900	965	1	1558	1558	NUM
fuelectenerg-900	965	2	-	-	SYM
fuelectenerg-900	965	3	1565	1565	NUM
fuelectenerg-900	965	4	,	,	PUNCT
fuelectenerg-900	965	5	1999	1999	NUM
fuelectenerg-900	965	6	.	.	PUNCT
fuelectenerg-900	966	1	[	[	X
fuelectenerg-900	966	2	111	111	NUM
fuelectenerg-900	966	3	]	]	PUNCT
fuelectenerg-900	966	4	a.	a.	NOUN
fuelectenerg-900	966	5	n.	n.	PROPN
fuelectenerg-900	966	6	cleland	cleland	PROPN
fuelectenerg-900	966	7	and	and	CCONJ
fuelectenerg-900	966	8	m.	m.	PROPN
fuelectenerg-900	966	9	l.	l.	PROPN
fuelectenerg-900	966	10	roukes	roukes	PROPN
fuelectenerg-900	966	11	,	,	PUNCT
fuelectenerg-900	966	12	"	"	PUNCT
fuelectenerg-900	966	13	noise	noise	NOUN
fuelectenerg-900	966	14	processes	process	NOUN
fuelectenerg-900	966	15	in	in	ADP
fuelectenerg-900	966	16	nanomechanical	nanomechanical	ADJ
fuelectenerg-900	966	17	resonators	resonator	NOUN
fuelectenerg-900	966	18	"	"	PUNCT
fuelectenerg-900	966	19	,	,	PUNCT
fuelectenerg-900	966	20	j.	j.	PROPN
fuelectenerg-900	966	21	appl	appl	PROPN
fuelectenerg-900	966	22	.	.	PUNCT
fuelectenerg-900	967	1	lett	lett	PROPN
fuelectenerg-900	967	2	.	.	PROPN
fuelectenerg-900	967	3	,	,	PUNCT
fuelectenerg-900	967	4	vol	vol	NOUN
fuelectenerg-900	967	5	.	.	PROPN
fuelectenerg-900	968	1	92	92	NUM
fuelectenerg-900	968	2	,	,	PUNCT
fuelectenerg-900	968	3	pp	pp	ADJ
fuelectenerg-900	968	4	.	.	PUNCT
fuelectenerg-900	969	1	2758	2758	NUM
fuelectenerg-900	969	2	-	-	SYM
fuelectenerg-900	969	3	2769	2769	NUM
fuelectenerg-900	969	4	,	,	PUNCT
fuelectenerg-900	969	5	2002	2002	NUM
fuelectenerg-900	969	6	.	.	PUNCT
fuelectenerg-900	970	1	rf	rf	VERB
fuelectenerg-900	970	2	mems	mem	NOUN
fuelectenerg-900	970	3	/	/	SYM
fuelectenerg-900	970	4	nems	nem	NOUN
fuelectenerg-900	970	5	resonators	resonator	NOUN
fuelectenerg-900	970	6	for	for	ADP
fuelectenerg-900	970	7	wireless	wireless	ADJ
fuelectenerg-900	970	8	communication	communication	NOUN
fuelectenerg-900	970	9	systems	system	NOUN
fuelectenerg-900	970	10	and	and	CCONJ
fuelectenerg-900	970	11	adsorption	adsorption	NOUN
fuelectenerg-900	970	12	-	-	PUNCT
fuelectenerg-900	970	13	desorption	desorption	NOUN
fuelectenerg-900	970	14	phase	phase	NOUN
fuelectenerg-900	970	15	noise	noise	NOUN
fuelectenerg-900	970	16	381	381	NUM
fuelectenerg-900	970	17	[	[	X
fuelectenerg-900	970	18	112	112	NUM
fuelectenerg-900	970	19	]	]	PUNCT
fuelectenerg-900	970	20	z.	z.	PROPN
fuelectenerg-900	970	21	djurić	djurić	PROPN
fuelectenerg-900	970	22	,	,	PUNCT
fuelectenerg-900	970	23	"	"	PUNCT
fuelectenerg-900	970	24	noise	noise	NOUN
fuelectenerg-900	970	25	in	in	ADP
fuelectenerg-900	970	26	nanoelectromechanical	nanoelectromechanical	ADJ
fuelectenerg-900	970	27	systems	system	NOUN
fuelectenerg-900	970	28	"	"	PUNCT
fuelectenerg-900	970	29	,	,	PUNCT
fuelectenerg-900	970	30	invited	invite	VERB
fuelectenerg-900	970	31	paper	paper	NOUN
fuelectenerg-900	970	32	,	,	PUNCT
fuelectenerg-900	970	33	in	in	ADP
fuelectenerg-900	970	34	proceedings	proceeding	NOUN
fuelectenerg-900	970	35	of	of	ADP
fuelectenerg-900	970	36	the	the	DET
fuelectenerg-900	970	37	1st	1st	ADJ
fuelectenerg-900	970	38	international	international	ADJ
fuelectenerg-900	970	39	workshop	workshop	NOUN
fuelectenerg-900	970	40	on	on	ADP
fuelectenerg-900	970	41	nanoscience	nanoscience	PROPN
fuelectenerg-900	970	42	&	&	CCONJ
fuelectenerg-900	970	43	nanotechnology	nanotechnology	PROPN
fuelectenerg-900	970	44	iwon	iwon	VERB
fuelectenerg-900	970	45	2005	2005	NUM
fuelectenerg-900	970	46	,	,	PUNCT
fuelectenerg-900	970	47	belgrade	belgrade	PROPN
fuelectenerg-900	970	48	,	,	PUNCT
fuelectenerg-900	970	49	serbia	serbia	PROPN
fuelectenerg-900	970	50	and	and	CCONJ
fuelectenerg-900	970	51	montenegro	montenegro	PROPN
fuelectenerg-900	970	52	,	,	PUNCT
fuelectenerg-900	970	53	2005	2005	NUM
fuelectenerg-900	970	54	,	,	PUNCT
fuelectenerg-900	970	55	pp	pp	ADJ
fuelectenerg-900	970	56	.	.	PUNCT
fuelectenerg-900	971	1	33	33	NUM
fuelectenerg-900	971	2	-	-	SYM
fuelectenerg-900	971	3	36	36	NUM
fuelectenerg-900	971	4	.	.	PUNCT
fuelectenerg-900	972	1	[	[	X
fuelectenerg-900	972	2	113	113	NUM
fuelectenerg-900	972	3	]	]	PUNCT
fuelectenerg-900	972	4	z.	z.	PROPN
fuelectenerg-900	972	5	djurić	djurić	PROPN
fuelectenerg-900	972	6	,	,	PUNCT
fuelectenerg-900	972	7	"	"	PUNCT
fuelectenerg-900	972	8	noise	noise	NOUN
fuelectenerg-900	972	9	in	in	ADP
fuelectenerg-900	972	10	microsystems	microsystem	NOUN
fuelectenerg-900	972	11	and	and	CCONJ
fuelectenerg-900	972	12	semiconductor	semiconductor	NOUN
fuelectenerg-900	972	13	photodetectors	photodetector	NOUN
fuelectenerg-900	972	14	"	"	PUNCT
fuelectenerg-900	972	15	,	,	PUNCT
fuelectenerg-900	972	16	in	in	ADP
fuelectenerg-900	972	17	proceedings	proceeding	NOUN
fuelectenerg-900	972	18	of	of	ADP
fuelectenerg-900	972	19	the	the	DET
fuelectenerg-900	972	20	xliv	xliv	PROPN
fuelectenerg-900	972	21	conference	conference	PROPN
fuelectenerg-900	972	22	etran	etran	ADJ
fuelectenerg-900	972	23	,	,	PUNCT
fuelectenerg-900	972	24	sokobanja	sokobanja	PROPN
fuelectenerg-900	972	25	,	,	PUNCT
fuelectenerg-900	972	26	serbia	serbia	PROPN
fuelectenerg-900	972	27	,	,	PUNCT
fuelectenerg-900	972	28	2000	2000	NUM
fuelectenerg-900	972	29	,	,	PUNCT
fuelectenerg-900	972	30	pp	pp	ADJ
fuelectenerg-900	972	31	.	.	PUNCT
fuelectenerg-900	973	1	9	9	NUM
fuelectenerg-900	973	2	-	-	SYM
fuelectenerg-900	973	3	16	16	NUM
fuelectenerg-900	973	4	.	.	PUNCT
fuelectenerg-900	974	1	[	[	X
fuelectenerg-900	974	2	114	114	NUM
fuelectenerg-900	974	3	]	]	PUNCT
fuelectenerg-900	974	4	y.	y.	PROPN
fuelectenerg-900	974	5	k.	k.	PROPN
fuelectenerg-900	974	6	yong	yong	PROPN
fuelectenerg-900	974	7	and	and	CCONJ
fuelectenerg-900	974	8	j.	j.	PROPN
fuelectenerg-900	974	9	r.	r.	PROPN
fuelectenerg-900	974	10	vig	vig	PROPN
fuelectenerg-900	974	11	,	,	PUNCT
fuelectenerg-900	974	12	"	"	PUNCT
fuelectenerg-900	974	13	resonator	resonator	NOUN
fuelectenerg-900	974	14	surface	surface	NOUN
fuelectenerg-900	974	15	contamination	contamination	NOUN
fuelectenerg-900	974	16	–	–	PUNCT
fuelectenerg-900	974	17	a	a	DET
fuelectenerg-900	974	18	cause	cause	NOUN
fuelectenerg-900	974	19	of	of	ADP
fuelectenerg-900	974	20	frequency	frequency	NOUN
fuelectenerg-900	974	21	fluctuations	fluctuation	NOUN
fuelectenerg-900	974	22	?	?	PUNCT
fuelectenerg-900	974	23	"	"	PUNCT
fuelectenerg-900	974	24	,	,	PUNCT
fuelectenerg-900	974	25	ieee	ieee	PROPN
fuelectenerg-900	974	26	trans	trans	PROPN
fuelectenerg-900	974	27	.	.	PUNCT
fuelectenerg-900	975	1	ultrason	ultrason	PROPN
fuelectenerg-900	975	2	.	.	PUNCT
fuelectenerg-900	976	1	ferroelect	ferroelect	PROPN
fuelectenerg-900	976	2	.	.	PUNCT
fuelectenerg-900	977	1	control	control	NOUN
fuelectenerg-900	977	2	,	,	PUNCT
fuelectenerg-900	977	3	vol	vol	NOUN
fuelectenerg-900	977	4	.	.	PROPN
fuelectenerg-900	977	5	36	36	NUM
fuelectenerg-900	977	6	,	,	PUNCT
fuelectenerg-900	977	7	pp	pp	ADJ
fuelectenerg-900	977	8	.	.	PUNCT
fuelectenerg-900	978	1	452	452	NUM
fuelectenerg-900	978	2	-	-	SYM
fuelectenerg-900	978	3	458	458	NUM
fuelectenerg-900	978	4	,	,	PUNCT
fuelectenerg-900	978	5	1989	1989	NUM
fuelectenerg-900	978	6	.	.	PUNCT
fuelectenerg-900	979	1	[	[	X
fuelectenerg-900	979	2	115	115	NUM
fuelectenerg-900	979	3	]	]	PUNCT
fuelectenerg-900	979	4	z.	z.	PROPN
fuelectenerg-900	979	5	djurić	djurić	PROPN
fuelectenerg-900	979	6	,	,	PUNCT
fuelectenerg-900	979	7	o.	o.	PROPN
fuelectenerg-900	979	8	jakšić	jakšić	PROPN
fuelectenerg-900	979	9	and	and	CCONJ
fuelectenerg-900	979	10	d.	d.	PROPN
fuelectenerg-900	979	11	randjelović	randjelović	NOUN
fuelectenerg-900	979	12	,	,	PUNCT
fuelectenerg-900	979	13	"	"	PUNCT
fuelectenerg-900	979	14	adsorption	adsorption	NOUN
fuelectenerg-900	979	15	–	–	PUNCT
fuelectenerg-900	979	16	desorption	desorption	NOUN
fuelectenerg-900	979	17	noise	noise	NOUN
fuelectenerg-900	979	18	in	in	ADP
fuelectenerg-900	979	19	micromechanical	micromechanical	ADJ
fuelectenerg-900	979	20	resonant	resonant	NOUN
fuelectenerg-900	979	21	structures	structure	NOUN
fuelectenerg-900	979	22	"	"	PUNCT
fuelectenerg-900	979	23	,	,	PUNCT
fuelectenerg-900	979	24	sens	sen	NOUN
fuelectenerg-900	979	25	.	.	PROPN
fuelectenerg-900	979	26	actuators	actuator	NOUN
fuelectenerg-900	979	27	a	a	PRON
fuelectenerg-900	979	28	,	,	PUNCT
fuelectenerg-900	979	29	vol	vol	NOUN
fuelectenerg-900	979	30	.	.	PROPN
fuelectenerg-900	980	1	96	96	NUM
fuelectenerg-900	980	2	,	,	PUNCT
fuelectenerg-900	980	3	pp	pp	ADJ
fuelectenerg-900	980	4	.	.	PUNCT
fuelectenerg-900	981	1	244	244	NUM
fuelectenerg-900	981	2	-	-	SYM
fuelectenerg-900	981	3	251	251	NUM
fuelectenerg-900	981	4	,	,	PUNCT
fuelectenerg-900	981	5	2002	2002	NUM
fuelectenerg-900	981	6	.	.	PUNCT
fuelectenerg-900	982	1	[	[	X
fuelectenerg-900	982	2	116	116	X
fuelectenerg-900	982	3	]	]	X
fuelectenerg-900	982	4	z.	z.	PROPN
fuelectenerg-900	982	5	djurić	djurić	PROPN
fuelectenerg-900	982	6	,	,	PUNCT
fuelectenerg-900	982	7	i.	i.	PROPN
fuelectenerg-900	982	8	jokić	jokić	PROPN
fuelectenerg-900	982	9	,	,	PUNCT
fuelectenerg-900	982	10	m.	m.	NOUN
fuelectenerg-900	982	11	frantlović	frantlović	NOUN
fuelectenerg-900	982	12	,	,	PUNCT
fuelectenerg-900	982	13	o.	o.	PROPN
fuelectenerg-900	982	14	jakšić	jakšić	PROPN
fuelectenerg-900	982	15	and	and	CCONJ
fuelectenerg-900	982	16	d.	d.	PROPN
fuelectenerg-900	982	17	vasiljević	vasiljević	PROPN
fuelectenerg-900	982	18	-	-	PUNCT
fuelectenerg-900	982	19	radović	radović	PROPN
fuelectenerg-900	982	20	,	,	PUNCT
fuelectenerg-900	982	21	"	"	PUNCT
fuelectenerg-900	982	22	adsorbed	adsorb	VERB
fuelectenerg-900	982	23	mass	mass	NOUN
fuelectenerg-900	982	24	and	and	CCONJ
fuelectenerg-900	982	25	resonant	resonant	ADJ
fuelectenerg-900	982	26	frequency	frequency	NOUN
fuelectenerg-900	982	27	fluctuations	fluctuation	NOUN
fuelectenerg-900	982	28	of	of	ADP
fuelectenerg-900	982	29	a	a	DET
fuelectenerg-900	982	30	microcantilever	microcantilever	NOUN
fuelectenerg-900	982	31	caused	cause	VERB
fuelectenerg-900	982	32	by	by	ADP
fuelectenerg-900	982	33	adsorption	adsorption	NOUN
fuelectenerg-900	982	34	and	and	CCONJ
fuelectenerg-900	982	35	desorption	desorption	NOUN
fuelectenerg-900	982	36	of	of	ADP
fuelectenerg-900	982	37	particles	particle	NOUN
fuelectenerg-900	982	38	of	of	ADP
fuelectenerg-900	982	39	two	two	NUM
fuelectenerg-900	982	40	gases	gas	NOUN
fuelectenerg-900	982	41	"	"	PUNCT
fuelectenerg-900	982	42	,	,	PUNCT
fuelectenerg-900	982	43	in	in	ADP
fuelectenerg-900	982	44	proceedings	proceeding	NOUN
fuelectenerg-900	982	45	of	of	ADP
fuelectenerg-900	982	46	the	the	DET
fuelectenerg-900	982	47	24th	24th	ADJ
fuelectenerg-900	982	48	international	international	ADJ
fuelectenerg-900	982	49	conference	conference	NOUN
fuelectenerg-900	982	50	on	on	ADP
fuelectenerg-900	982	51	microelectronics	microelectronic	NOUN
fuelectenerg-900	982	52	miel	miel	PROPN
fuelectenerg-900	982	53	2004	2004	NUM
fuelectenerg-900	982	54	,	,	PUNCT
fuelectenerg-900	982	55	vol	vol	NOUN
fuelectenerg-900	982	56	.	.	PROPN
fuelectenerg-900	982	57	1	1	NUM
fuelectenerg-900	982	58	,	,	PUNCT
fuelectenerg-900	982	59	niš	niš	NOUN
fuelectenerg-900	982	60	,	,	PUNCT
fuelectenerg-900	982	61	serbia	serbia	PROPN
fuelectenerg-900	982	62	,	,	PUNCT
fuelectenerg-900	982	63	2004	2004	NUM
fuelectenerg-900	982	64	,	,	PUNCT
fuelectenerg-900	982	65	pp	pp	ADV
fuelectenerg-900	982	66	.	.	PUNCT
fuelectenerg-900	983	1	197	197	NUM
fuelectenerg-900	983	2	-	-	SYM
fuelectenerg-900	983	3	200	200	NUM
fuelectenerg-900	983	4	.	.	PUNCT
fuelectenerg-900	984	1	[	[	X
fuelectenerg-900	984	2	117	117	NUM
fuelectenerg-900	984	3	]	]	PUNCT
fuelectenerg-900	984	4	z.	z.	PROPN
fuelectenerg-900	984	5	djurić	djurić	PROPN
fuelectenerg-900	984	6	,	,	PUNCT
fuelectenerg-900	984	7	i.	i.	PROPN
fuelectenerg-900	984	8	jokić	jokić	PROPN
fuelectenerg-900	984	9	,	,	PUNCT
fuelectenerg-900	984	10	m.	m.	NOUN
fuelectenerg-900	984	11	frantlović	frantlović	NOUN
fuelectenerg-900	984	12	and	and	CCONJ
fuelectenerg-900	984	13	o.	o.	PROPN
fuelectenerg-900	984	14	jakšić	jakšić	PROPN
fuelectenerg-900	984	15	,	,	PUNCT
fuelectenerg-900	984	16	"	"	PUNCT
fuelectenerg-900	984	17	fluctuations	fluctuation	NOUN
fuelectenerg-900	984	18	of	of	ADP
fuelectenerg-900	984	19	the	the	DET
fuelectenerg-900	984	20	number	number	NOUN
fuelectenerg-900	984	21	of	of	ADP
fuelectenerg-900	984	22	particles	particle	NOUN
fuelectenerg-900	984	23	and	and	CCONJ
fuelectenerg-900	984	24	mass	mass	NOUN
fuelectenerg-900	984	25	adsorbed	adsorb	VERB
fuelectenerg-900	984	26	on	on	ADP
fuelectenerg-900	984	27	the	the	DET
fuelectenerg-900	984	28	sensor	sensor	NOUN
fuelectenerg-900	984	29	surface	surface	NOUN
fuelectenerg-900	984	30	surrounded	surround	VERB
fuelectenerg-900	984	31	by	by	ADP
fuelectenerg-900	984	32	a	a	DET
fuelectenerg-900	984	33	mixture	mixture	NOUN
fuelectenerg-900	984	34	of	of	ADP
fuelectenerg-900	984	35	an	an	DET
fuelectenerg-900	984	36	arbitrary	arbitrary	ADJ
fuelectenerg-900	984	37	number	number	NOUN
fuelectenerg-900	984	38	of	of	ADP
fuelectenerg-900	984	39	gases	gas	NOUN
fuelectenerg-900	984	40	"	"	PUNCT
fuelectenerg-900	984	41	,	,	PUNCT
fuelectenerg-900	984	42	sens	sen	NOUN
fuelectenerg-900	984	43	.	.	PROPN
fuelectenerg-900	984	44	actuators	actuator	NOUN
fuelectenerg-900	984	45	b	b	PROPN
fuelectenerg-900	984	46	,	,	PUNCT
fuelectenerg-900	984	47	vol	vol	NOUN
fuelectenerg-900	984	48	.	.	PUNCT
fuelectenerg-900	985	1	127	127	NUM
fuelectenerg-900	985	2	,	,	PUNCT
fuelectenerg-900	985	3	pp	pp	ADJ
fuelectenerg-900	985	4	.	.	PUNCT
fuelectenerg-900	986	1	625	625	NUM
fuelectenerg-900	986	2	-	-	SYM
fuelectenerg-900	986	3	631	631	NUM
fuelectenerg-900	986	4	,	,	PUNCT
fuelectenerg-900	986	5	2007	2007	NUM
fuelectenerg-900	986	6	.	.	PUNCT
fuelectenerg-900	987	1	[	[	X
fuelectenerg-900	987	2	118	118	NUM
fuelectenerg-900	987	3	]	]	X
fuelectenerg-900	987	4	i.	i.	PROPN
fuelectenerg-900	987	5	jokić	jokić	PROPN
fuelectenerg-900	987	6	,	,	PUNCT
fuelectenerg-900	987	7	z.	z.	PROPN
fuelectenerg-900	987	8	djurić	djurić	PROPN
fuelectenerg-900	987	9	,	,	PUNCT
fuelectenerg-900	987	10	m.	m.	NOUN
fuelectenerg-900	987	11	frantlović	frantlović	NOUN
fuelectenerg-900	987	12	,	,	PUNCT
fuelectenerg-900	987	13	k.	k.	PROPN
fuelectenerg-900	987	14	radulović	radulović	PROPN
fuelectenerg-900	987	15	,	,	PUNCT
fuelectenerg-900	987	16	p.	p.	NOUN
fuelectenerg-900	987	17	krstajić	krstajić	PROPN
fuelectenerg-900	987	18	and	and	CCONJ
fuelectenerg-900	987	19	z.	z.	PROPN
fuelectenerg-900	987	20	jokić	jokić	PROPN
fuelectenerg-900	987	21	,	,	PUNCT
fuelectenerg-900	987	22	"	"	PUNCT
fuelectenerg-900	987	23	fluctuations	fluctuation	NOUN
fuelectenerg-900	987	24	of	of	ADP
fuelectenerg-900	987	25	the	the	DET
fuelectenerg-900	987	26	number	number	NOUN
fuelectenerg-900	987	27	of	of	ADP
fuelectenerg-900	987	28	adsorbed	adsorb	VERB
fuelectenerg-900	987	29	molecules	molecule	NOUN
fuelectenerg-900	987	30	in	in	ADP
fuelectenerg-900	987	31	biosensors	biosensor	NOUN
fuelectenerg-900	987	32	due	due	ADP
fuelectenerg-900	987	33	to	to	ADP
fuelectenerg-900	987	34	stochastic	stochastic	ADJ
fuelectenerg-900	987	35	adsorption	adsorption	NOUN
fuelectenerg-900	987	36	–	–	PUNCT
fuelectenerg-900	987	37	desorption	desorption	NOUN
fuelectenerg-900	987	38	processes	process	NOUN
fuelectenerg-900	987	39	coupled	couple	VERB
fuelectenerg-900	987	40	with	with	ADP
fuelectenerg-900	987	41	mass	mass	ADJ
fuelectenerg-900	987	42	transfer	transfer	NOUN
fuelectenerg-900	987	43	"	"	PUNCT
fuelectenerg-900	987	44	,	,	PUNCT
fuelectenerg-900	987	45	sens	sen	NOUN
fuelectenerg-900	987	46	.	.	PROPN
fuelectenerg-900	987	47	actuators	actuator	NOUN
fuelectenerg-900	987	48	b	b	PROPN
fuelectenerg-900	987	49	,	,	PUNCT
fuelectenerg-900	987	50	vol	vol	NOUN
fuelectenerg-900	987	51	.	.	PUNCT
fuelectenerg-900	988	1	166–167	166–167	NUM
fuelectenerg-900	988	2	,	,	PUNCT
fuelectenerg-900	988	3	pp	pp	ADJ
fuelectenerg-900	988	4	.	.	PUNCT
fuelectenerg-900	989	1	535–543	535–543	NUM
fuelectenerg-900	989	2	,	,	PUNCT
fuelectenerg-900	989	3	2012	2012	NUM
fuelectenerg-900	989	4	.	.	PUNCT
fuelectenerg-900	990	1	[	[	X
fuelectenerg-900	990	2	119	119	NUM
fuelectenerg-900	990	3	]	]	PUNCT
fuelectenerg-900	990	4	m.	m.	NOUN
fuelectenerg-900	990	5	frantlović	frantlović	NOUN
fuelectenerg-900	990	6	,	,	PUNCT
fuelectenerg-900	990	7	i.	i.	PROPN
fuelectenerg-900	990	8	jokić	jokić	PROPN
fuelectenerg-900	990	9	,	,	PUNCT
fuelectenerg-900	990	10	z.	z.	PROPN
fuelectenerg-900	990	11	djurić	djurić	PROPN
fuelectenerg-900	990	12	and	and	CCONJ
fuelectenerg-900	990	13	k.	k.	PROPN
fuelectenerg-900	990	14	radulović	radulović	PROPN
fuelectenerg-900	990	15	,	,	PUNCT
fuelectenerg-900	990	16	"	"	PUNCT
fuelectenerg-900	990	17	analysis	analysis	NOUN
fuelectenerg-900	990	18	of	of	ADP
fuelectenerg-900	990	19	the	the	DET
fuelectenerg-900	990	20	competitive	competitive	ADJ
fuelectenerg-900	990	21	adsorption	adsorption	NOUN
fuelectenerg-900	990	22	and	and	CCONJ
fuelectenerg-900	990	23	mass	mass	NOUN
fuelectenerg-900	990	24	transfer	transfer	NOUN
fuelectenerg-900	990	25	influence	influence	NOUN
fuelectenerg-900	990	26	on	on	ADP
fuelectenerg-900	990	27	equilibrium	equilibrium	NOUN
fuelectenerg-900	990	28	mass	mass	NOUN
fuelectenerg-900	990	29	fluctuations	fluctuation	NOUN
fuelectenerg-900	990	30	in	in	ADP
fuelectenerg-900	990	31	affinity	affinity	NOUN
fuelectenerg-900	990	32	-	-	PUNCT
fuelectenerg-900	990	33	based	base	VERB
fuelectenerg-900	990	34	biosensors	biosensor	NOUN
fuelectenerg-900	990	35	"	"	PUNCT
fuelectenerg-900	990	36	,	,	PUNCT
fuelectenerg-900	990	37	sens	sen	NOUN
fuelectenerg-900	990	38	.	.	PROPN
fuelectenerg-900	990	39	actuators	actuator	NOUN
fuelectenerg-900	990	40	b	b	PROPN
fuelectenerg-900	990	41	,	,	PUNCT
fuelectenerg-900	990	42	vol	vol	NOUN
fuelectenerg-900	990	43	.	.	PROPN
fuelectenerg-900	990	44	189	189	NUM
fuelectenerg-900	990	45	,	,	PUNCT
fuelectenerg-900	990	46	pp	pp	ADJ
fuelectenerg-900	990	47	.	.	PUNCT
fuelectenerg-900	991	1	71	71	NUM
fuelectenerg-900	991	2	-	-	SYM
fuelectenerg-900	991	3	79	79	NUM
fuelectenerg-900	991	4	,	,	PUNCT
fuelectenerg-900	991	5	2013	2013	NUM
fuelectenerg-900	991	6	.	.	PUNCT
fuelectenerg-900	992	1	[	[	X
fuelectenerg-900	992	2	120	120	NUM
fuelectenerg-900	992	3	]	]	PUNCT
fuelectenerg-900	992	4	z.	z.	PROPN
fuelectenerg-900	992	5	djurić	djurić	PROPN
fuelectenerg-900	992	6	,	,	PUNCT
fuelectenerg-900	992	7	i.	i.	PROPN
fuelectenerg-900	992	8	jokić	jokić	PROPN
fuelectenerg-900	992	9	,	,	PUNCT
fuelectenerg-900	992	10	m.	m.	NOUN
fuelectenerg-900	992	11	frantlović	frantlović	NOUN
fuelectenerg-900	992	12	and	and	CCONJ
fuelectenerg-900	992	13	k.	k.	PROPN
fuelectenerg-900	992	14	radulović	radulović	PROPN
fuelectenerg-900	992	15	,	,	PUNCT
fuelectenerg-900	992	16	"	"	PUNCT
fuelectenerg-900	992	17	two	two	NUM
fuelectenerg-900	992	18	-	-	PUNCT
fuelectenerg-900	992	19	layer	layer	NOUN
fuelectenerg-900	992	20	adsorption	adsorption	NOUN
fuelectenerg-900	992	21	and	and	CCONJ
fuelectenerg-900	992	22	adsorbed	adsorb	VERB
fuelectenerg-900	992	23	mass	mass	ADJ
fuelectenerg-900	992	24	fluctuations	fluctuation	NOUN
fuelectenerg-900	992	25	on	on	ADP
fuelectenerg-900	992	26	micro	micro	NOUN
fuelectenerg-900	992	27	/	/	SYM
fuelectenerg-900	992	28	nanostructures	nanostructure	NOUN
fuelectenerg-900	992	29	"	"	PUNCT
fuelectenerg-900	992	30	,	,	PUNCT
fuelectenerg-900	992	31	microel	microel	ADV
fuelectenerg-900	992	32	.	.	PUNCT
fuelectenerg-900	993	1	eng	eng	PROPN
fuelectenerg-900	993	2	.	.	PROPN
fuelectenerg-900	993	3	,	,	PUNCT
fuelectenerg-900	993	4	vol	vol	NOUN
fuelectenerg-900	993	5	.	.	PROPN
fuelectenerg-900	993	6	86	86	NUM
fuelectenerg-900	993	7	,	,	PUNCT
fuelectenerg-900	993	8	pp	pp	ADJ
fuelectenerg-900	993	9	.	.	PUNCT
fuelectenerg-900	993	10	1278	1278	NUM
fuelectenerg-900	993	11	-	-	SYM
fuelectenerg-900	993	12	1281	1281	NUM
fuelectenerg-900	993	13	,	,	PUNCT
fuelectenerg-900	993	14	2009	2009	NUM
fuelectenerg-900	993	15	.	.	PUNCT
fuelectenerg-900	994	1	[	[	X
fuelectenerg-900	994	2	121	121	NUM
fuelectenerg-900	994	3	]	]	PUNCT
fuelectenerg-900	994	4	z.	z.	PROPN
fuelectenerg-900	994	5	djurić	djurić	PROPN
fuelectenerg-900	994	6	,	,	PUNCT
fuelectenerg-900	994	7	i.	i.	PROPN
fuelectenerg-900	994	8	jokić	jokić	PROPN
fuelectenerg-900	994	9	,	,	PUNCT
fuelectenerg-900	994	10	m.	m.	NOUN
fuelectenerg-900	994	11	djukić	djukić	NOUN
fuelectenerg-900	994	12	and	and	CCONJ
fuelectenerg-900	994	13	m.	m.	NOUN
fuelectenerg-900	994	14	frantlović	frantlović	NOUN
fuelectenerg-900	994	15	,	,	PUNCT
fuelectenerg-900	994	16	"	"	PUNCT
fuelectenerg-900	994	17	fluctuations	fluctuation	NOUN
fuelectenerg-900	994	18	of	of	ADP
fuelectenerg-900	994	19	the	the	DET
fuelectenerg-900	994	20	adsorbed	adsorb	VERB
fuelectenerg-900	994	21	mass	mass	NOUN
fuelectenerg-900	994	22	and	and	CCONJ
fuelectenerg-900	994	23	the	the	DET
fuelectenerg-900	994	24	resonant	resonant	ADJ
fuelectenerg-900	994	25	frequency	frequency	NOUN
fuelectenerg-900	994	26	of	of	ADP
fuelectenerg-900	994	27	vibrating	vibrate	VERB
fuelectenerg-900	994	28	mems	mem	NOUN
fuelectenerg-900	994	29	/	/	SYM
fuelectenerg-900	994	30	nems	nem	NOUN
fuelectenerg-900	994	31	structures	structure	NOUN
fuelectenerg-900	994	32	due	due	ADJ
fuelectenerg-900	994	33	to	to	ADP
fuelectenerg-900	994	34	multilayer	multilayer	ADJ
fuelectenerg-900	994	35	adsorption	adsorption	NOUN
fuelectenerg-900	994	36	"	"	PUNCT
fuelectenerg-900	994	37	,	,	PUNCT
fuelectenerg-900	994	38	microel	microel	ADV
fuelectenerg-900	994	39	.	.	PUNCT
fuelectenerg-900	995	1	eng	eng	PROPN
fuelectenerg-900	995	2	.	.	PROPN
fuelectenerg-900	995	3	,	,	PUNCT
fuelectenerg-900	995	4	vol	vol	NOUN
fuelectenerg-900	995	5	.	.	PROPN
fuelectenerg-900	996	1	87	87	NUM
fuelectenerg-900	996	2	,	,	PUNCT
fuelectenerg-900	996	3	pp	pp	ADJ
fuelectenerg-900	996	4	.	.	PUNCT
fuelectenerg-900	997	1	1181	1181	NUM
fuelectenerg-900	997	2	-	-	SYM
fuelectenerg-900	997	3	1184	1184	NUM
fuelectenerg-900	997	4	,	,	PUNCT
fuelectenerg-900	997	5	2010	2010	NUM
fuelectenerg-900	997	6	.	.	PUNCT
fuelectenerg-900	998	1	[	[	X
fuelectenerg-900	998	2	122	122	NUM
fuelectenerg-900	998	3	]	]	X
fuelectenerg-900	998	4	i.	i.	PROPN
fuelectenerg-900	998	5	jokić	jokić	PROPN
fuelectenerg-900	998	6	,	,	PUNCT
fuelectenerg-900	998	7	m.	m.	NOUN
fuelectenerg-900	998	8	frantlović	frantlović	NOUN
fuelectenerg-900	998	9	and	and	CCONJ
fuelectenerg-900	998	10	z.	z.	PROPN
fuelectenerg-900	998	11	djurić	djurić	PROPN
fuelectenerg-900	998	12	,	,	PUNCT
fuelectenerg-900	998	13	"	"	PUNCT
fuelectenerg-900	998	14	rf	rf	ADJ
fuelectenerg-900	998	15	mems	mem	NOUN
fuelectenerg-900	998	16	and	and	CCONJ
fuelectenerg-900	998	17	nems	nem	NOUN
fuelectenerg-900	998	18	components	component	NOUN
fuelectenerg-900	998	19	and	and	CCONJ
fuelectenerg-900	998	20	adsorption	adsorption	NOUN
fuelectenerg-900	998	21	-	-	PUNCT
fuelectenerg-900	998	22	desorption	desorption	NOUN
fuelectenerg-900	998	23	induced	induce	VERB
fuelectenerg-900	998	24	phase	phase	NOUN
fuelectenerg-900	998	25	noise	noise	NOUN
fuelectenerg-900	998	26	"	"	PUNCT
fuelectenerg-900	998	27	,	,	PUNCT
fuelectenerg-900	998	28	in	in	ADP
fuelectenerg-900	998	29	proceedings	proceeding	NOUN
fuelectenerg-900	998	30	of	of	ADP
fuelectenerg-900	998	31	the	the	DET
fuelectenerg-900	998	32	29th	29th	ADJ
fuelectenerg-900	998	33	international	international	ADJ
fuelectenerg-900	998	34	conference	conference	NOUN
fuelectenerg-900	998	35	on	on	ADP
fuelectenerg-900	998	36	microelectronics	microelectronic	NOUN
fuelectenerg-900	998	37	miel	miel	PROPN
fuelectenerg-900	998	38	2014	2014	NUM
fuelectenerg-900	998	39	,	,	PUNCT
fuelectenerg-900	998	40	belgrade	belgrade	PROPN
fuelectenerg-900	998	41	,	,	PUNCT
fuelectenerg-900	998	42	serbia	serbia	PROPN
fuelectenerg-900	998	43	,	,	PUNCT
fuelectenerg-900	998	44	2014	2014	NUM
fuelectenerg-900	998	45	,	,	PUNCT
fuelectenerg-900	998	46	pp	pp	ADJ
fuelectenerg-900	998	47	.	.	PUNCT
fuelectenerg-900	999	1	117	117	NUM
fuelectenerg-900	999	2	-	-	SYM
fuelectenerg-900	999	3	124	124	NUM
fuelectenerg-900	999	4	.	.	PUNCT
fuelectenerg-900	1000	1	[	[	X
fuelectenerg-900	1000	2	123	123	NUM
fuelectenerg-900	1000	3	]	]	PUNCT
fuelectenerg-900	1000	4	i.	i.	PROPN
fuelectenerg-900	1000	5	jokić	jokić	PROPN
fuelectenerg-900	1000	6	,	,	PUNCT
fuelectenerg-900	1000	7	m.	m.	NOUN
fuelectenerg-900	1000	8	frantlović	frantlović	NOUN
fuelectenerg-900	1000	9	,	,	PUNCT
fuelectenerg-900	1000	10	z.	z.	PROPN
fuelectenerg-900	1000	11	djurić	djurić	PROPN
fuelectenerg-900	1000	12	and	and	CCONJ
fuelectenerg-900	1000	13	m.	m.	PROPN
fuelectenerg-900	1000	14	dukić	dukić	PROPN
fuelectenerg-900	1000	15	,	,	PUNCT
fuelectenerg-900	1000	16	"	"	PUNCT
fuelectenerg-900	1000	17	adsorption	adsorption	NOUN
fuelectenerg-900	1000	18	-	-	PUNCT
fuelectenerg-900	1000	19	desorption	desorption	NOUN
fuelectenerg-900	1000	20	phase	phase	NOUN
fuelectenerg-900	1000	21	noise	noise	NOUN
fuelectenerg-900	1000	22	in	in	ADP
fuelectenerg-900	1000	23	rf	rf	NOUN
fuelectenerg-900	1000	24	mems	mem	NOUN
fuelectenerg-900	1000	25	/	/	SYM
fuelectenerg-900	1000	26	nems	nem	NOUN
fuelectenerg-900	1000	27	resonators	resonator	NOUN
fuelectenerg-900	1000	28	"	"	PUNCT
fuelectenerg-900	1000	29	,	,	PUNCT
fuelectenerg-900	1000	30	in	in	ADP
fuelectenerg-900	1000	31	proceedings	proceeding	NOUN
fuelectenerg-900	1000	32	of	of	ADP
fuelectenerg-900	1000	33	the	the	DET
fuelectenerg-900	1000	34	10th	10th	ADJ
fuelectenerg-900	1000	35	international	international	ADJ
fuelectenerg-900	1000	36	conference	conference	NOUN
fuelectenerg-900	1000	37	on	on	ADP
fuelectenerg-900	1000	38	telecommunications	telecommunication	NOUN
fuelectenerg-900	1000	39	in	in	ADP
fuelectenerg-900	1000	40	modern	modern	ADJ
fuelectenerg-900	1000	41	satellite	satellite	NOUN
fuelectenerg-900	1000	42	,	,	PUNCT
fuelectenerg-900	1000	43	cable	cable	NOUN
fuelectenerg-900	1000	44	and	and	CCONJ
fuelectenerg-900	1000	45	broadcasting	broadcasting	NOUN
fuelectenerg-900	1000	46	services	service	NOUN
fuelectenerg-900	1000	47	telsiks	telsiks	NOUN
fuelectenerg-900	1000	48	,	,	PUNCT
fuelectenerg-900	1000	49	niš	niš	NOUN
fuelectenerg-900	1000	50	,	,	PUNCT
fuelectenerg-900	1000	51	serbia	serbia	PROPN
fuelectenerg-900	1000	52	,	,	PUNCT
fuelectenerg-900	1000	53	2011	2011	NUM
fuelectenerg-900	1000	54	,	,	PUNCT
fuelectenerg-900	1000	55	pp	pp	ADJ
fuelectenerg-900	1000	56	.	.	PUNCT
fuelectenerg-900	1000	57	114	114	NUM
fuelectenerg-900	1000	58	-	-	SYM
fuelectenerg-900	1000	59	117	117	NUM
fuelectenerg-900	1000	60	.	.	PUNCT
fuelectenerg-900	1001	1	[	[	X
fuelectenerg-900	1001	2	124	124	NUM
fuelectenerg-900	1001	3	]	]	X
fuelectenerg-900	1001	4	k.m	k.m	PROPN
fuelectenerg-900	1001	5	.	.	PROPN
fuelectenerg-900	1001	6	van	van	PROPN
fuelectenerg-900	1001	7	vliet	vliet	PROPN
fuelectenerg-900	1001	8	and	and	CCONJ
fuelectenerg-900	1001	9	j.r	j.r	PROPN
fuelectenerg-900	1001	10	.	.	PROPN
fuelectenerg-900	1001	11	fasset	fasset	PROPN
fuelectenerg-900	1001	12	,	,	PUNCT
fuelectenerg-900	1001	13	"	"	PUNCT
fuelectenerg-900	1001	14	fluctuations	fluctuation	NOUN
fuelectenerg-900	1001	15	due	due	ADJ
fuelectenerg-900	1001	16	to	to	ADP
fuelectenerg-900	1001	17	electronic	electronic	ADJ
fuelectenerg-900	1001	18	transitions	transition	NOUN
fuelectenerg-900	1001	19	and	and	CCONJ
fuelectenerg-900	1001	20	transport	transport	NOUN
fuelectenerg-900	1001	21	in	in	ADP
fuelectenerg-900	1001	22	solids	solid	NOUN
fuelectenerg-900	1001	23	"	"	PUNCT
fuelectenerg-900	1001	24	,	,	PUNCT
fuelectenerg-900	1001	25	in	in	ADP
fuelectenerg-900	1001	26	fluctuation	fluctuation	NOUN
fuelectenerg-900	1001	27	phenomena	phenomenon	NOUN
fuelectenerg-900	1001	28	in	in	ADP
fuelectenerg-900	1001	29	solids	solid	NOUN
fuelectenerg-900	1001	30	,	,	PUNCT
fuelectenerg-900	1001	31	r.	r.	PROPN
fuelectenerg-900	1001	32	e.	e.	PROPN
fuelectenerg-900	1001	33	burgess	burgess	PROPN
fuelectenerg-900	1001	34	,	,	PUNCT
fuelectenerg-900	1001	35	ed	ed	PROPN
fuelectenerg-900	1001	36	.	.	PROPN
fuelectenerg-900	1001	37	,	,	PUNCT
fuelectenerg-900	1001	38	new	new	PROPN
fuelectenerg-900	1001	39	york	york	PROPN
fuelectenerg-900	1001	40	and	and	CCONJ
fuelectenerg-900	1001	41	london	london	PROPN
fuelectenerg-900	1001	42	:	:	PUNCT
fuelectenerg-900	1001	43	academic	academic	ADJ
fuelectenerg-900	1001	44	press	press	NOUN
fuelectenerg-900	1001	45	,	,	PUNCT
fuelectenerg-900	1001	46	1965	1965	NUM
fuelectenerg-900	1001	47	,	,	PUNCT
fuelectenerg-900	1001	48	pp	pp	ADJ
fuelectenerg-900	1001	49	.	.	PUNCT
fuelectenerg-900	1002	1	267	267	NUM
fuelectenerg-900	1002	2	-	-	SYM
fuelectenerg-900	1002	3	354	354	NUM
fuelectenerg-900	1002	4	.	.	PUNCT
fuelectenerg-900	1003	1	[	[	X
fuelectenerg-900	1003	2	125	125	NUM
fuelectenerg-900	1003	3	]	]	PUNCT
fuelectenerg-900	1003	4	s.	s.	PROPN
fuelectenerg-900	1003	5	yousefi	yousefi	PROPN
fuelectenerg-900	1003	6	,	,	PUNCT
fuelectenerg-900	1003	7	t.	t.	PROPN
fuelectenerg-900	1003	8	eriksson	eriksson	PROPN
fuelectenerg-900	1003	9	and	and	CCONJ
fuelectenerg-900	1003	10	d.	d.	PROPN
fuelectenerg-900	1003	11	kuylenstierna	kuylenstierna	PROPN
fuelectenerg-900	1003	12	,	,	PUNCT
fuelectenerg-900	1003	13	"	"	PUNCT
fuelectenerg-900	1003	14	a	a	DET
fuelectenerg-900	1003	15	novel	novel	ADJ
fuelectenerg-900	1003	16	model	model	NOUN
fuelectenerg-900	1003	17	for	for	ADP
fuelectenerg-900	1003	18	simulation	simulation	NOUN
fuelectenerg-900	1003	19	of	of	ADP
fuelectenerg-900	1003	20	rf	rf	NOUN
fuelectenerg-900	1003	21	oscillator	oscillator	NOUN
fuelectenerg-900	1003	22	phase	phase	NOUN
fuelectenerg-900	1003	23	noise	noise	NOUN
fuelectenerg-900	1003	24	"	"	PUNCT
fuelectenerg-900	1003	25	,	,	PUNCT
fuelectenerg-900	1003	26	in	in	ADP
fuelectenerg-900	1003	27	proceedings	proceeding	NOUN
fuelectenerg-900	1003	28	of	of	ADP
fuelectenerg-900	1003	29	the	the	DET
fuelectenerg-900	1003	30	ieee	ieee	NOUN
fuelectenerg-900	1003	31	radio	radio	NOUN
fuelectenerg-900	1003	32	and	and	CCONJ
fuelectenerg-900	1003	33	wireless	wireless	ADJ
fuelectenerg-900	1003	34	symposium	symposium	NOUN
fuelectenerg-900	1003	35	,	,	PUNCT
fuelectenerg-900	1003	36	new	new	PROPN
fuelectenerg-900	1003	37	orleans	orleans	PROPN
fuelectenerg-900	1003	38	,	,	PUNCT
fuelectenerg-900	1003	39	2010	2010	NUM
fuelectenerg-900	1003	40	,	,	PUNCT
fuelectenerg-900	1003	41	pp.428	pp.428	PROPN
fuelectenerg-900	1003	42	-	-	PUNCT
fuelectenerg-900	1003	43	431	431	NUM
fuelectenerg-900	1003	44	.	.	PUNCT
fuelectenerg-900	1004	1	[	[	X
fuelectenerg-900	1004	2	126	126	NUM
fuelectenerg-900	1004	3	]	]	X
fuelectenerg-900	1004	4	g.	g.	PROPN
fuelectenerg-900	1004	5	v.	v.	ADP
fuelectenerg-900	1004	6	klimovitch	klimovitch	PROPN
fuelectenerg-900	1004	7	,	,	PUNCT
fuelectenerg-900	1004	8	"	"	PUNCT
fuelectenerg-900	1004	9	near	near	ADJ
fuelectenerg-900	1004	10	-	-	PUNCT
fuelectenerg-900	1004	11	carrier	carrier	NOUN
fuelectenerg-900	1004	12	oscillator	oscillator	NOUN
fuelectenerg-900	1004	13	spectrum	spectrum	NOUN
fuelectenerg-900	1004	14	due	due	ADP
fuelectenerg-900	1004	15	to	to	ADP
fuelectenerg-900	1004	16	flicker	flicker	ADJ
fuelectenerg-900	1004	17	and	and	CCONJ
fuelectenerg-900	1004	18	white	white	ADJ
fuelectenerg-900	1004	19	noise	noise	NOUN
fuelectenerg-900	1004	20	"	"	PUNCT
fuelectenerg-900	1004	21	,	,	PUNCT
fuelectenerg-900	1004	22	in	in	ADP
fuelectenerg-900	1004	23	proceedings	proceeding	NOUN
fuelectenerg-900	1004	24	of	of	ADP
fuelectenerg-900	1004	25	the	the	DET
fuelectenerg-900	1004	26	ieee	ieee	NOUN
fuelectenerg-900	1004	27	international	international	ADJ
fuelectenerg-900	1004	28	symposium	symposium	NOUN
fuelectenerg-900	1004	29	on	on	ADP
fuelectenerg-900	1004	30	circuits	circuit	NOUN
fuelectenerg-900	1004	31	and	and	CCONJ
fuelectenerg-900	1004	32	systems	system	NOUN
fuelectenerg-900	1004	33	iscas	isca	NOUN
fuelectenerg-900	1004	34	2000	2000	NUM
fuelectenerg-900	1004	35	,	,	PUNCT
fuelectenerg-900	1004	36	vol	vol	NOUN
fuelectenerg-900	1004	37	.	.	PROPN
fuelectenerg-900	1004	38	1	1	NUM
fuelectenerg-900	1004	39	,	,	PUNCT
fuelectenerg-900	1004	40	geneva	geneva	PROPN
fuelectenerg-900	1004	41	,	,	PUNCT
fuelectenerg-900	1004	42	2000	2000	NUM
fuelectenerg-900	1004	43	,	,	PUNCT
fuelectenerg-900	1004	44	pp.703	pp.703	NOUN
fuelectenerg-900	1004	45	-	-	PUNCT
fuelectenerg-900	1004	46	706	706	NUM
fuelectenerg-900	1004	47	.	.	PUNCT
fuelectenerg-900	1005	1	[	[	X
fuelectenerg-900	1005	2	127	127	NUM
fuelectenerg-900	1005	3	]	]	PUNCT
fuelectenerg-900	1005	4	m.	m.	NOUN
fuelectenerg-900	1005	5	j.	j.	PROPN
fuelectenerg-900	1005	6	buckingham	buckingham	PROPN
fuelectenerg-900	1005	7	,	,	PUNCT
fuelectenerg-900	1005	8	noise	noise	NOUN
fuelectenerg-900	1005	9	in	in	ADP
fuelectenerg-900	1005	10	electronic	electronic	ADJ
fuelectenerg-900	1005	11	devices	device	NOUN
fuelectenerg-900	1005	12	and	and	CCONJ
fuelectenerg-900	1005	13	systems	system	NOUN
fuelectenerg-900	1005	14	,	,	PUNCT
fuelectenerg-900	1005	15	ellis	ellis	PROPN
fuelectenerg-900	1005	16	horwood	horwood	PROPN
fuelectenerg-900	1005	17	ltd	ltd	PROPN
fuelectenerg-900	1005	18	.	.	PROPN
fuelectenerg-900	1005	19	,	,	PUNCT
fuelectenerg-900	1005	20	1983	1983	NUM
fuelectenerg-900	1005	21	.	.	PUNCT