id	sid	eid	entity	type
fumecheng-10949	1	1	10949	DATE
fumecheng-10949	1	2	20	CARDINAL
fumecheng-10949	1	3	2022	DATE
fumecheng-10949	2	1	553 560	CARDINAL
fumecheng-10949	2	2	2022	CARDINAL
fumecheng-10949	2	3	university of niš	ORG
fumecheng-10949	2	4	serbia	GPE
fumecheng-10949	2	5	nc	GPE
fumecheng-10949	2	6	hwang1	PRODUCT
fumecheng-10949	2	7	paolo matteini2	PERSON
fumecheng-10949	3	1	1school	CARDINAL
fumecheng-10949	3	2	chung-ang university	ORG
fumecheng-10949	3	3	2institute	CARDINAL
fumecheng-10949	3	4	national research council	ORG
fumecheng-10949	3	5	italy	GPE
fumecheng-10949	9	1	300,000	CARDINAL
fumecheng-10949	11	1	1	CARDINAL
fumecheng-10949	11	2	17	CARDINAL
fumecheng-10949	12	1	8	CARDINAL
fumecheng-10949	14	1	more than 300,000	CARDINAL
fumecheng-10949	14	2	10	CARDINAL
fumecheng-10949	16	1	july 30	DATE
fumecheng-10949	16	2	september 28	DATE
fumecheng-10949	16	3	2022	CARDINAL
fumecheng-10949	16	4	chung-ang university	ORG
fumecheng-10949	16	5	84	CARDINAL
fumecheng-10949	16	6	dongjak-gu	PERSON
fumecheng-10949	16	7	seoul	GPE
fumecheng-10949	16	8	06974	DATE
fumecheng-10949	17	1	554	CARDINAL
fumecheng-10949	17	2	b. hwang	PERSON
fumecheng-10949	17	3	han	NORP
fumecheng-10949	17	4	11	CARDINAL
fumecheng-10949	17	5	12	CARDINAL
fumecheng-10949	20	1	9	CARDINAL
fumecheng-10949	20	2	13	DATE
fumecheng-10949	20	3	14	CARDINAL
fumecheng-10949	22	1	15	CARDINAL
fumecheng-10949	24	1	16	CARDINAL
fumecheng-10949	30	1	17	CARDINAL
fumecheng-10949	34	1	the cu/ag	ORG
fumecheng-10949	36	1	2	CARDINAL
fumecheng-10949	36	2	2.1	CARDINAL
fumecheng-10949	37	1	0.1	CARDINAL
fumecheng-10949	37	2	south korea	GPE
fumecheng-10949	38	1	fig	ORG
fumecheng-10949	39	1	1	CARDINAL
fumecheng-10949	40	1	first	ORDINAL
fumecheng-10949	40	2	dupont	ORG
fumecheng-10949	41	1	5 min	TIME
fumecheng-10949	41	2	#rd 6	MONEY
fumecheng-10949	42	1	third	ORDINAL
fumecheng-10949	42	2	80 °	QUANTITY
fumecheng-10949	42	3	10	CARDINAL
fumecheng-10949	43	1	100	CARDINAL
fumecheng-10949	43	2	15 min	DATE
fumecheng-10949	43	3	~400	FAC
fumecheng-10949	44	1	carl zeiss	PERSON
fumecheng-10949	45	1	bruker-axs	ORG
fumecheng-10949	45	2	555	CARDINAL
fumecheng-10949	46	1	0.154	CARDINAL
fumecheng-10949	46	2	2θ	CARDINAL
fumecheng-10949	46	3	30º	ORG
fumecheng-10949	46	4	100º.	CARDINAL
fumecheng-10949	47	1	1	CARDINAL
fumecheng-10949	47	2	2.2	CARDINAL
fumecheng-10949	48	1	south korea	GPE
fumecheng-10949	48	2	ω	DATE
fumecheng-10949	48	3	fig	ORG
fumecheng-10949	49	1	2	CARDINAL
fumecheng-10949	50	1	two	CARDINAL
fumecheng-10949	51	1	two	CARDINAL
fumecheng-10949	53	1	two	CARDINAL
fumecheng-10949	56	1	fig	ORG
fumecheng-10949	57	1	2	CARDINAL
fumecheng-10949	57	2	3	CARDINAL
fumecheng-10949	57	3	3.1	CARDINAL
fumecheng-10949	59	1	3	CARDINAL
fumecheng-10949	60	1	111	CARDINAL
fumecheng-10949	60	2	43.71º	CARDINAL
fumecheng-10949	60	3	200	CARDINAL
fumecheng-10949	60	4	50.44º	CARDINAL
fumecheng-10949	60	5	50.28º	CARDINAL
fumecheng-10949	61	1	3a	CARDINAL
fumecheng-10949	62	1	40º	CARDINAL
fumecheng-10949	63	1	3c	CARDINAL
fumecheng-10949	64	1	556	CARDINAL
fumecheng-10949	64	2	han	NORP
fumecheng-10949	65	1	  = k	PERSON
fumecheng-10949	65	2	half	CARDINAL
fumecheng-10949	66	1	0.9	CARDINAL
fumecheng-10949	66	2	0.154	CARDINAL
fumecheng-10949	67	1	111	CARDINAL
fumecheng-10949	67	2	0.56	CARDINAL
fumecheng-10949	67	3	0.55	CARDINAL
fumecheng-10949	68	1	15.3	CARDINAL
fumecheng-10949	68	2	15.5	CARDINAL
fumecheng-10949	71	1	3	CARDINAL
fumecheng-10949	71	2	3.2	CARDINAL
fumecheng-10949	73	1	4a	CARDINAL
fumecheng-10949	73	2	3 mm	QUANTITY
fumecheng-10949	75	1	up to 300,000	CARDINAL
fumecheng-10949	76	1	up to 40,000	CARDINAL
fumecheng-10949	77	1	300%	PERCENT
fumecheng-10949	79	1	20,000	CARDINAL
fumecheng-10949	79	2	2b	CARDINAL
fumecheng-10949	81	1	~113%	PERCENT
fumecheng-10949	81	2	~151%	PERCENT
fumecheng-10949	84	1	557	CARDINAL
fumecheng-10949	85	1	4	CARDINAL
fumecheng-10949	85	2	30,000	CARDINAL
fumecheng-10949	85	3	300,000	CARDINAL
fumecheng-10949	86	1	3	CARDINAL
fumecheng-10949	87	1	3a	CARDINAL
fumecheng-10949	89	1	3b	CARDINAL
fumecheng-10949	90	1	300,000	CARDINAL
fumecheng-10949	91	1	3b	CARDINAL
fumecheng-10949	92	1	fig	ORG
fumecheng-10949	93	1	5	CARDINAL
fumecheng-10949	93	2	300,000	CARDINAL
fumecheng-10949	93	3	4	CARDINAL
fumecheng-10949	93	4	two	CARDINAL
fumecheng-10949	93	5	1	CARDINAL
fumecheng-10949	93	6	2	CARDINAL
fumecheng-10949	95	1	3a	CARDINAL
fumecheng-10949	95	2	cu thin films	ORG
fumecheng-10949	97	1	6a	CARDINAL
fumecheng-10949	98	1	3a	CARDINAL
fumecheng-10949	100	1	6a	CARDINAL
fumecheng-10949	103	1	3b	CARDINAL
fumecheng-10949	104	1	558	CARDINAL
fumecheng-10949	104	2	han	NORP
fumecheng-10949	104	3	6b	CARDINAL
fumecheng-10949	105	1	van der waals	PERSON
fumecheng-10949	107	1	6b	CARDINAL
fumecheng-10949	112	1	tem	ORG
fumecheng-10949	115	1	6	CARDINAL
fumecheng-10949	115	2	second	ORDINAL
fumecheng-10949	116	1	2 2	CARDINAL
fumecheng-10949	116	2	2	CARDINAL
fumecheng-10949	124	1	2	CARDINAL
fumecheng-10949	124	2	y(i+1	ORG
fumecheng-10949	125	1	14	CARDINAL
fumecheng-10949	125	2	24	CARDINAL
fumecheng-10949	126	1	559	CARDINAL
fumecheng-10949	126	2	3	CARDINAL
fumecheng-10949	126	3	ν	NORP
fumecheng-10949	127	1	1	CARDINAL
fumecheng-10949	128	1	69.3	CARDINAL
fumecheng-10949	128	2	71.2	CARDINAL
fumecheng-10949	129	1	2.8%	PERCENT
fumecheng-10949	129	2	2.7%	PERCENT
fumecheng-10949	131	1	more than 300,000	CARDINAL
fumecheng-10949	132	1	fig	ORG
fumecheng-10949	133	1	7	CARDINAL
fumecheng-10949	133	2	5	CARDINAL
fumecheng-10949	133	3	cu/ag	ORG
fumecheng-10949	136	1	300,000	CARDINAL
fumecheng-10949	137	1	300,000	CARDINAL
fumecheng-10949	139	1	a national research foundation	ORG
fumecheng-10949	139	2	korea	GPE
fumecheng-10949	139	3	nrf	ORG
fumecheng-10949	139	4	korean	NORP
fumecheng-10949	139	5	msit	PERSON
fumecheng-10949	140	1	the chung-ang university graduate research scholarship	FAC
fumecheng-10949	140	2	2022	CARDINAL
fumecheng-10949	141	1	1	CARDINAL
fumecheng-10949	142	1	hwang	PERSON
fumecheng-10949	142	2	b.	PERSON
fumecheng-10949	142	3	lee	PERSON
fumecheng-10949	142	4	lee	PERSON
fumecheng-10949	142	5	e., becker	PERSON
fumecheng-10949	142	6	s.	PERSON
fumecheng-10949	142	7	kim	PERSON
fumecheng-10949	142	8	y.-h.	GPE
fumecheng-10949	142	9	kim	PERSON
fumecheng-10949	142	10	2017	DATE
fumecheng-10949	142	11	7(1	CARDINAL
fumecheng-10949	142	12	41336	DATE
fumecheng-10949	143	1	2	CARDINAL
fumecheng-10949	143	2	kim	PERSON
fumecheng-10949	143	3	d.	NORP
fumecheng-10949	143	4	kim	PERSON
fumecheng-10949	143	5	kim	PERSON
fumecheng-10949	143	6	j.h.	GPE
fumecheng-10949	143	7	lee	PERSON
fumecheng-10949	143	8	j.-c.	GPE
fumecheng-10949	143	9	j.-p.	GPE
fumecheng-10949	143	10	kim	PERSON
fumecheng-10949	143	11	s.w.	GPE
fumecheng-10949	143	12	2017	DATE
fumecheng-10949	143	13	7(1	CARDINAL
fumecheng-10949	143	14	45903	DATE
fumecheng-10949	144	1	560	CARDINAL
fumecheng-10949	144	2	han	NORP
fumecheng-10949	145	1	3	CARDINAL
fumecheng-10949	146	1	mastrogiannakis, i.	ORG
fumecheng-10949	146	2	2020	DATE
fumecheng-10949	146	3	18(1	CARDINAL
fumecheng-10949	148	1	43-55	CARDINAL
fumecheng-10949	149	1	4. sae-long	CARDINAL
fumecheng-10949	149	2	w.	PERSON
fumecheng-10949	149	3	s.	GPE
fumecheng-10949	149	4	sukontasukkul	GPE
fumecheng-10949	149	5	j., prachasaree	PERSON
fumecheng-10949	149	6	w.	PERSON
fumecheng-10949	149	7	2021	DATE
fumecheng-10949	149	8	fourth	ORDINAL
fumecheng-10949	151	1	657	CARDINAL
fumecheng-10949	152	1	5	CARDINAL
fumecheng-10949	152	2	a.n.	GPE
fumecheng-10949	152	3	khan	GPE
fumecheng-10949	152	4	s.m.	GPE
fumecheng-10949	152	5	bunaiyan	GPE
fumecheng-10949	152	6	s.	GPE
fumecheng-10949	152	7	hussain	GPE
fumecheng-10949	152	8	m.m.	PERSON
fumecheng-10949	152	9	2021	CARDINAL
fumecheng-10949	152	10	31(7	CARDINAL
fumecheng-10949	152	11	2007445	DATE
fumecheng-10949	153	1	6	CARDINAL
fumecheng-10949	153	2	lee	PERSON
fumecheng-10949	153	3	b.h.	GPE
fumecheng-10949	153	4	kim	PERSON
fumecheng-10949	153	5	j., koo	PERSON
fumecheng-10949	153	6	j.m.	GPE
fumecheng-10949	153	7	hwang	PERSON
fumecheng-10949	153	8	b.	PERSON
fumecheng-10949	153	9	2022	CARDINAL
fumecheng-10949	153	10	144	CARDINAL
fumecheng-10949	153	11	107535	DATE
fumecheng-10949	154	1	7	CARDINAL
fumecheng-10949	154	2	a.n.	GPE
fumecheng-10949	154	3	khan	GPE
fumecheng-10949	154	4	s.m.	GPE
fumecheng-10949	154	5	n.	ORG
fumecheng-10949	154	6	hussain	GPE
fumecheng-10949	154	7	m.m.	PERSON
fumecheng-10949	154	8	2021	DATE
fumecheng-10949	154	9	130(1	CARDINAL
fumecheng-10949	154	10	014902	DATE
fumecheng-10949	155	1	8	CARDINAL
fumecheng-10949	155	2	m., kim	PERSON
fumecheng-10949	155	3	w.	PERSON
fumecheng-10949	155	4	hwang	PERSON
fumecheng-10949	155	5	b.	PERSON
fumecheng-10949	155	6	han	GPE
fumecheng-10949	155	7	s.m.	GPE
fumecheng-10949	155	8	2019	DATE
fumecheng-10949	155	9	161	CARDINAL
fumecheng-10949	156	1	70-73	CARDINAL
fumecheng-10949	158	1	kim	PERSON
fumecheng-10949	158	2	t.	GPE
fumecheng-10949	158	3	a.	PERSON
fumecheng-10949	158	4	kim	PERSON
fumecheng-10949	158	5	g.h.	GPE
fumecheng-10949	158	6	j., park	GPE
fumecheng-10949	158	7	han	NORP
fumecheng-10949	158	8	s.m.	GPE
fumecheng-10949	158	9	2013	DATE
fumecheng-10949	158	10	5(3	CARDINAL
fumecheng-10949	159	1	788-794	CARDINAL
fumecheng-10949	160	1	10	CARDINAL
fumecheng-10949	161	1	hwang	PERSON
fumecheng-10949	161	2	kim	PERSON
fumecheng-10949	161	3	t.	GPE
fumecheng-10949	161	4	joo	ORG
fumecheng-10949	161	5	y.c.	GPE
fumecheng-10949	161	6	han	NORP
fumecheng-10949	161	7	s.m.	GPE
fumecheng-10949	161	8	2014	DATE
fumecheng-10949	162	1	3397-3404	DATE
fumecheng-10949	163	1	11	CARDINAL
fumecheng-10949	164	1	r.	NORP
fumecheng-10949	164	2	1999	DATE
fumecheng-10949	164	3	scripta materialia	GPE
fumecheng-10949	164	4	41(8	DATE
fumecheng-10949	165	1	823-829	CARDINAL
fumecheng-10949	166	1	12	CARDINAL
fumecheng-10949	167	1	r.	NORP
fumecheng-10949	167	2	2003	DATE
fumecheng-10949	167	3	51(1	CARDINAL
fumecheng-10949	168	1	195206	DATE
fumecheng-10949	169	1	13	CARDINAL
fumecheng-10949	170	1	hwang	PERSON
fumecheng-10949	170	2	b.	GPE
fumecheng-10949	170	3	m., kim	PERSON
fumecheng-10949	170	4	t.	GPE
fumecheng-10949	170	5	han	NORP
fumecheng-10949	170	6	s.	GPE
fumecheng-10949	170	7	2016	DATE
fumecheng-10949	170	8	rsc advances	ORG
fumecheng-10949	170	9	6(71	CARDINAL
fumecheng-10949	171	1	67389-67395	DATE
fumecheng-10949	172	1	14	DATE
fumecheng-10949	173	1	lee	PERSON
fumecheng-10949	173	2	c., kim	PERSON
fumecheng-10949	173	3	hwang	PERSON
fumecheng-10949	173	4	b.	PERSON
fumecheng-10949	173	5	2019	DATE
fumecheng-10949	173	6	773	CARDINAL
fumecheng-10949	174	1	361-366	CARDINAL
fumecheng-10949	175	1	15	CARDINAL
fumecheng-10949	176	1	hwang	PERSON
fumecheng-10949	176	2	b.	PERSON
fumecheng-10949	176	3	kim	PERSON
fumecheng-10949	176	4	w.	PERSON
fumecheng-10949	176	5	kim	PERSON
fumecheng-10949	176	6	j., lee	PERSON
fumecheng-10949	176	7	s., lim	PERSON
fumecheng-10949	176	8	s.	PERSON
fumecheng-10949	176	9	kim	PERSON
fumecheng-10949	176	10	s.	PERSON
fumecheng-10949	176	11	s.h.	GPE
fumecheng-10949	176	12	ryu	ORG
fumecheng-10949	176	13	s.	PERSON
fumecheng-10949	176	14	han	GPE
fumecheng-10949	176	15	s.m.	GPE
fumecheng-10949	176	16	2017	DATE
fumecheng-10949	177	1	4740-4745	DATE
fumecheng-10949	178	1	16	CARDINAL
fumecheng-10949	179	1	kim	PERSON
fumecheng-10949	179	2	jung	PERSON
fumecheng-10949	179	3	han	NORP
fumecheng-10949	179	4	h.n.	GPE
fumecheng-10949	179	5	nam	GPE
fumecheng-10949	179	6	k.t.	GPE
fumecheng-10949	179	7	joo	PERSON
fumecheng-10949	179	8	i.-s.	GPE
fumecheng-10949	179	9	2012	DATE
fumecheng-10949	179	10	8(21	CARDINAL
fumecheng-10949	179	11	3300-3306	DATE
fumecheng-10949	180	1	17	CARDINAL
fumecheng-10949	180	2	hu	PERSON
fumecheng-10949	180	3	l.	PERSON
fumecheng-10949	180	4	kim	PERSON
fumecheng-10949	180	5	h.s.	GPE
fumecheng-10949	180	6	lee	PERSON
fumecheng-10949	180	7	j.-y.	GPE
fumecheng-10949	180	8	peumans	NORP
fumecheng-10949	180	9	2010	DATE
fumecheng-10949	180	10	4(5	DATE
fumecheng-10949	180	11	2955-2963	CARDINAL
fumecheng-10949	181	1	lee	PERSON
fumecheng-10949	181	2	j., lee, i.	PERSON
fumecheng-10949	181	3	kim	PERSON
fumecheng-10949	181	4	t.s.	GPE
fumecheng-10949	181	5	lee	GPE
fumecheng-10949	181	6	j.y.	GPE
fumecheng-10949	181	7	2013	DATE
fumecheng-10949	181	8	9(17	CARDINAL
fumecheng-10949	181	9	2887-2894	CARDINAL
fumecheng-10949	183	1	liu	PERSON
fumecheng-10949	183	2	yu	PERSON
fumecheng-10949	183	3	x.	GPE
fumecheng-10949	183	4	2011	DATE
fumecheng-10949	183	5	6(1	CARDINAL
fumecheng-10949	184	1	1-8	DATE
fumecheng-10949	185	1	liu	PERSON
fumecheng-10949	185	2	r.	NORP
fumecheng-10949	185	3	m., zhang	PERSON
fumecheng-10949	185	4	x.	GPE
fumecheng-10949	185	5	xu	PERSON
fumecheng-10949	185	6	l.	PERSON
fumecheng-10949	185	7	chen	PERSON
fumecheng-10949	185	8	j., chen	PERSON
fumecheng-10949	185	9	x.	GPE
fumecheng-10949	185	10	wan, l., 2018	PERSON
fumecheng-10949	185	11	174	CARDINAL
fumecheng-10949	186	1	584-592	CARDINAL
fumecheng-10949	188	1	zeng	PERSON
fumecheng-10949	188	2	x.y.	PERSON
fumecheng-10949	188	3	zhang, q.k.	ORG
fumecheng-10949	188	4	yu	GPE
fumecheng-10949	188	5	r.m.	GPE
fumecheng-10949	188	6	lu	PERSON
fumecheng-10949	188	7	c.z.	GPE
fumecheng-10949	188	8	2010	DATE
fumecheng-10949	188	9	22(40	CARDINAL
fumecheng-10949	188	10	4484-4488	DATE
fumecheng-10949	189	1	22	DATE
fumecheng-10949	190	1	zhang	PERSON
fumecheng-10949	190	2	d.	NORP
fumecheng-10949	190	3	ryu	ORG
fumecheng-10949	190	4	k., liu	PERSON
fumecheng-10949	190	5	x.	GPE
fumecheng-10949	190	6	polikarpov	GPE
fumecheng-10949	190	7	e.	PERSON
fumecheng-10949	190	8	j., tompson	ORG
fumecheng-10949	190	9	m.e.	GPE
fumecheng-10949	190	10	zhou	PERSON
fumecheng-10949	190	11	2006	DATE
fumecheng-10949	190	12	6(9	CARDINAL
fumecheng-10949	191	1	1880-1886	DATE
fumecheng-10949	192	1	23	CARDINAL
fumecheng-10949	193	1	yang	PERSON
fumecheng-10949	193	2	t.	GPE
fumecheng-10949	193	3	zhou	PERSON
fumecheng-10949	193	4	s.c.	GPE
fumecheng-10949	193	5	wiley	GPE
fumecheng-10949	193	6	b.j.	GPE
fumecheng-10949	193	7	w.	PERSON
fumecheng-10949	193	8	2011	DATE
fumecheng-10949	193	9	3(10	CARDINAL
fumecheng-10949	194	1	4075-4084	CARDINAL
fumecheng-10949	195	1	24	CARDINAL
fumecheng-10949	196	1	jing, h.	PERSON
fumecheng-10949	196	2	gou	NORP
fumecheng-10949	196	3	l.	PERSON
fumecheng-10949	196	4	2021	DATE
fumecheng-10949	196	5	28(4	TIME
fumecheng-10949	197	1	1211-1220	DATE