id	sid	eid	entity	type
fumecheng-12403	1	1	12403	DATE
fumecheng-12403	2	1	22	CARDINAL
fumecheng-12403	2	2	2024	DATE
fumecheng-12403	3	1	459 471	CARDINAL
fumecheng-12403	3	2	2024	DATE
fumecheng-12403	3	3	university of niš	ORG
fumecheng-12403	3	4	serbia	GPE
fumecheng-12403	3	5	nc	GPE
fumecheng-12403	3	6	kuznetsov1	ORG
fumecheng-12403	3	7	tatarintsev2	DATE
fumecheng-12403	3	8	vladimir v. voropaev2	PERSON
fumecheng-12403	3	9	korelin1 1ural federal university	ORG
fumecheng-12403	3	10	russia	GPE
fumecheng-12403	3	11	2kurgan	CARDINAL
fumecheng-12403	3	12	russia	GPE
fumecheng-12403	3	13	p. kuznetsov	PERSON
fumecheng-12403	3	14	vladimir v. voropaev https://orcid.org/0000-0001-8508-073x andrei	PERSON
fumecheng-12403	4	1	korelin https://orcid.org/0000-0003-0650-2805	PERSON
fumecheng-12403	6	1	microprotrusions	PERSON
fumecheng-12403	10	1	200	CARDINAL
fumecheng-12403	10	2	0.025 mm	QUANTITY
fumecheng-12403	10	3	three	CARDINAL
fumecheng-12403	12	1	3.8	CARDINAL
fumecheng-12403	12	2	8.1 μm	QUANTITY
fumecheng-12403	12	3	microprotrusions	PERSON
fumecheng-12403	12	4	0.15 µm	MONEY
fumecheng-12403	12	5	13.7410–5	CARDINAL
fumecheng-12403	12	6	mm3/mm2	PRODUCT
fumecheng-12403	13	1	december 15	DATE
fumecheng-12403	13	2	2023	CARDINAL
fumecheng-12403	13	3	february 09	DATE
fumecheng-12403	13	4	2024	CARDINAL
fumecheng-12403	13	5	vladimir voropaev kurgan	PERSON
fumecheng-12403	13	6	640020	DATE
fumecheng-12403	13	7	sovetskaya st. 63	PERSON
fumecheng-12403	13	8	4	DATE
fumecheng-12403	13	9	kurgan	GPE
fumecheng-12403	13	10	russia e-mail	GPE
fumecheng-12403	14	1	kuznetsov	GPE
fumecheng-12403	14	2	i.v	GPE
fumecheng-12403	14	3	tatarintsev	GPE
fumecheng-12403	14	4	v.v. voropaev	GPE
fumecheng-12403	14	5	korelin 1	ORG
fumecheng-12403	15	1	one	CARDINAL
fumecheng-12403	18	1	pawlus et al	PERSON
fumecheng-12403	19	1	1	CARDINAL
fumecheng-12403	21	1	2	CARDINAL
fumecheng-12403	23	1	5 to 13 µm	DATE
fumecheng-12403	23	2	0.15 to 0.33 mm	QUANTITY
fumecheng-12403	24	1	mezghani et al	PERSON
fumecheng-12403	25	1	3	CARDINAL
fumecheng-12403	25	2	4 to 6 µm	PERCENT
fumecheng-12403	25	3	50 to 100	CARDINAL
fumecheng-12403	26	1	zhang et al	PERSON
fumecheng-12403	27	1	4	CARDINAL
fumecheng-12403	29	1	molnar	PERSON
fumecheng-12403	30	1	5	CARDINAL
fumecheng-12403	30	2	3d	CARDINAL
fumecheng-12403	30	3	vmp	PERSON
fumecheng-12403	30	4	ssk	PERSON
fumecheng-12403	31	1	vmp	PERSON
fumecheng-12403	32	1	molnar	PERSON
fumecheng-12403	32	2	6	CARDINAL
fumecheng-12403	33	1	ssk	PERSON
fumecheng-12403	34	1	nadolny	PERSON
fumecheng-12403	35	1	fltp	PERSON
fumecheng-12403	35	2	st	GPE
fumecheng-12403	35	3	sv	ORG
fumecheng-12403	37	1	kuznetsov et al	PERSON
fumecheng-12403	38	1	8	CARDINAL
fumecheng-12403	38	2	one	CARDINAL
fumecheng-12403	38	3	cnc	ORG
fumecheng-12403	43	1	g. taguchi	PERSON
fumecheng-12403	44	1	9	CARDINAL
fumecheng-12403	45	1	461	CARDINAL
fumecheng-12403	45	2	10-11	CARDINAL
fumecheng-12403	45	3	12	CARDINAL
fumecheng-12403	46	1	13	CARDINAL
fumecheng-12403	49	1	15	CARDINAL
fumecheng-12403	51	1	16	CARDINAL
fumecheng-12403	52	1	17	CARDINAL
fumecheng-12403	52	2	18	CARDINAL
fumecheng-12403	53	1	popov	PERSON
fumecheng-12403	53	2	19	CARDINAL
fumecheng-12403	54	1	five	CARDINAL
fumecheng-12403	56	1	0.05 mm	QUANTITY
fumecheng-12403	56	2	0.04 mm	QUANTITY
fumecheng-12403	57	1	0.26 mm	QUANTITY
fumecheng-12403	57	2	first	ORDINAL
fumecheng-12403	60	1	only one	CARDINAL
fumecheng-12403	61	1	0.02 mm	QUANTITY
fumecheng-12403	65	1	martins et al	PERSON
fumecheng-12403	66	1	20	CARDINAL
fumecheng-12403	67	1	0.06 mm	QUANTITY
fumecheng-12403	68	1	0.09 and 0.12 mm	QUANTITY
fumecheng-12403	69	1	0.06 mm	QUANTITY
fumecheng-12403	69	2	16.667	CARDINAL
fumecheng-12403	72	1	0.15 mm	QUANTITY
fumecheng-12403	74	1	462	CARDINAL
fumecheng-12403	74	2	kuznetsov	GPE
fumecheng-12403	74	3	i.v	GPE
fumecheng-12403	74	4	tatarintsev	GPE
fumecheng-12403	74	5	v.v. voropaev	GPE
fumecheng-12403	74	6	korelin application	ORG
fumecheng-12403	75	1	2	CARDINAL
fumecheng-12403	76	1	23 mm	QUANTITY
fumecheng-12403	76	2	150 mm	QUANTITY
fumecheng-12403	76	3	0.37%	PERCENT
fumecheng-12403	76	4	1.34%	PERCENT
fumecheng-12403	76	5	1.1%	PERCENT
fumecheng-12403	76	6	0.47%	PERCENT
fumecheng-12403	76	7	0.21%	PERCENT
fumecheng-12403	76	8	0.05%	PERCENT
fumecheng-12403	76	9	0.024%	PERCENT
fumecheng-12403	76	10	0.019%	PERCENT
fumecheng-12403	76	11	440	CARDINAL
fumecheng-12403	76	12	900°	CARDINAL
fumecheng-12403	76	13	320°	QUANTITY
fumecheng-12403	78	1	l300	PRODUCT
fumecheng-12403	78	2	japan	GPE
fumecheng-12403	78	3	four	CARDINAL
fumecheng-12403	79	1	1,650	CARDINAL
fumecheng-12403	80	1	4969	CARDINAL
fumecheng-12403	82	1	20 mm	QUANTITY
fumecheng-12403	82	2	4 mm	QUANTITY
fumecheng-12403	83	1	160/125	DATE
fumecheng-12403	83	2	200/250	CARDINAL
fumecheng-12403	84	1	6 mm	QUANTITY
fumecheng-12403	86	1	1	CARDINAL
fumecheng-12403	86	2	wyko vision	ORG
fumecheng-12403	88	1	fig	ORG
fumecheng-12403	89	1	1	CARDINAL
fumecheng-12403	89	2	463 3	CARDINAL
fumecheng-12403	89	3	3.1	CARDINAL
fumecheng-12403	92	1	2	CARDINAL
fumecheng-12403	92	2	the wyko vision software	ORG
fumecheng-12403	92	3	mm3/mm2	PRODUCT
fumecheng-12403	94	1	2	CARDINAL
fumecheng-12403	94	2	two	CARDINAL
fumecheng-12403	94	3	3	CARDINAL
fumecheng-12403	95	1	first	ORDINAL
fumecheng-12403	95	2	n=1,650	CARDINAL
fumecheng-12403	96	1	second	ORDINAL
fumecheng-12403	96	2	fig	PERSON
fumecheng-12403	97	1	3	CARDINAL
fumecheng-12403	97	2	18	CARDINAL
fumecheng-12403	98	1	464	CARDINAL
fumecheng-12403	99	1	kuznetsov	GPE
fumecheng-12403	99	2	i.v	GPE
fumecheng-12403	99	3	tatarintsev	GPE
fumecheng-12403	99	4	v.v. voropaev	GPE
fumecheng-12403	99	5	korelin 3.2	PERSON
fumecheng-12403	100	1	three	CARDINAL
fumecheng-12403	100	2	np	ORG
fumecheng-12403	102	1	1	CARDINAL
fumecheng-12403	102	2	five	CARDINAL
fumecheng-12403	103	1	1	CARDINAL
fumecheng-12403	104	1	1	CARDINAL
fumecheng-12403	104	2	150 n	QUANTITY
fumecheng-12403	104	3	0.01 mm	QUANTITY
fumecheng-12403	104	4	1 623	CARDINAL
fumecheng-12403	104	5	150 n	QUANTITY
fumecheng-12403	104	6	0.025 mm	QUANTITY
fumecheng-12403	104	7	2 602.8	CARDINAL
fumecheng-12403	104	8	150 n	QUANTITY
fumecheng-12403	104	9	0.04 mm	QUANTITY
fumecheng-12403	104	10	3 595	CARDINAL
fumecheng-12403	104	11	200 n	QUANTITY
fumecheng-12403	104	12	0.01 mm	QUANTITY
fumecheng-12403	104	13	2	CARDINAL
fumecheng-12403	104	14	200 n	QUANTITY
fumecheng-12403	104	15	0.025 mm	QUANTITY
fumecheng-12403	104	16	3 657.4	CARDINAL
fumecheng-12403	104	17	200 n	QUANTITY
fumecheng-12403	104	18	0.04 mm	QUANTITY
fumecheng-12403	104	19	1 592.6	CARDINAL
fumecheng-12403	104	20	250 n	QUANTITY
fumecheng-12403	104	21	0.01 mm	QUANTITY
fumecheng-12403	104	22	3 584.2	CARDINAL
fumecheng-12403	104	23	250 n	QUANTITY
fumecheng-12403	104	24	0.025 mm	QUANTITY
fumecheng-12403	104	25	1 630.4	CARDINAL
fumecheng-12403	104	26	250 n	QUANTITY
fumecheng-12403	104	27	0.04 mm	QUANTITY
fumecheng-12403	104	28	2 615.8	CARDINAL
fumecheng-12403	104	29	19	CARDINAL
fumecheng-12403	106	1	4	CARDINAL
fumecheng-12403	107	1	4	CARDINAL
fumecheng-12403	107	2	465	CARDINAL
fumecheng-12403	110	1	4	CARDINAL
fumecheng-12403	110	2	mm	PERSON
fumecheng-12403	110	3	5	CARDINAL
fumecheng-12403	111	1	657.4	CARDINAL
fumecheng-12403	112	1	3	CARDINAL
fumecheng-12403	113	1	3	CARDINAL
fumecheng-12403	113	2	only 595	CARDINAL
fumecheng-12403	114	1	5	CARDINAL
fumecheng-12403	115	1	4	CARDINAL
fumecheng-12403	116	1	3	CARDINAL
fumecheng-12403	116	2	5	DATE
fumecheng-12403	116	3	7	DATE
fumecheng-12403	117	1	0.04	CARDINAL
fumecheng-12403	117	2	0.025	CARDINAL
fumecheng-12403	117	3	0.01 mm	QUANTITY
fumecheng-12403	117	4	150	CARDINAL
fumecheng-12403	117	5	200	CARDINAL
fumecheng-12403	117	6	250	CARDINAL
fumecheng-12403	117	7	three	CARDINAL
fumecheng-12403	119	1	176	CARDINAL
fumecheng-12403	119	2	psd=1129 nm2mm	PERSON
fumecheng-12403	119	3	5a	CARDINAL
fumecheng-12403	120	1	mm	PERSON
fumecheng-12403	120	2	5	CARDINAL
fumecheng-12403	120	3	5c	CARDINAL
fumecheng-12403	121	1	5	CARDINAL
fumecheng-12403	122	1	7	CARDINAL
fumecheng-12403	122	2	3293	CARDINAL
fumecheng-12403	122	3	5e	CARDINAL
fumecheng-12403	124	1	86.05	CARDINAL
fumecheng-12403	124	2	3	CARDINAL
fumecheng-12403	125	1	5b	CARDINAL
fumecheng-12403	125	2	94.38	CARDINAL
fumecheng-12403	125	3	5	CARDINAL
fumecheng-12403	125	4	fig	ORG
fumecheng-12403	126	1	5d	CARDINAL
fumecheng-12403	126	2	610.24	CARDINAL
fumecheng-12403	126	3	7	DATE
fumecheng-12403	126	4	fig	ORG
fumecheng-12403	126	5	5f	CARDINAL
fumecheng-12403	127	1	0.36	CARDINAL
fumecheng-12403	127	2	3	CARDINAL
fumecheng-12403	127	3	about two	CARDINAL
fumecheng-12403	127	4	0.65	CARDINAL
fumecheng-12403	127	5	5	CARDINAL
fumecheng-12403	127	6	1.21	CARDINAL
fumecheng-12403	127	7	7	CARDINAL
fumecheng-12403	128	1	5	CARDINAL
fumecheng-12403	130	1	mm	PERSON
fumecheng-12403	131	1	466	CARDINAL
fumecheng-12403	131	2	kuznetsov	GPE
fumecheng-12403	131	3	i.v	GPE
fumecheng-12403	131	4	tatarintsev	GPE
fumecheng-12403	131	5	v.v. voropaev	GPE
fumecheng-12403	131	6	korelin fig	PERSON
fumecheng-12403	132	1	5	CARDINAL
fumecheng-12403	132	2	3	CARDINAL
fumecheng-12403	132	3	5	CARDINAL
fumecheng-12403	132	4	7	CARDINAL
fumecheng-12403	132	5	467 3.3	CARDINAL
fumecheng-12403	135	1	160/125	DATE
fumecheng-12403	135	2	200/250	ORG
fumecheng-12403	135	3	200	CARDINAL
fumecheng-12403	135	4	12.5	CARDINAL
fumecheng-12403	135	5	15.5	CARDINAL
fumecheng-12403	136	1	linear	ORG
fumecheng-12403	136	2	30 m/min	QUANTITY
fumecheng-12403	136	3	2	CARDINAL
fumecheng-12403	137	1	fig	ORG
fumecheng-12403	138	1	6a	CARDINAL
fumecheng-12403	138	2	3d	CARDINAL
fumecheng-12403	138	3	160/125	DATE
fumecheng-12403	138	4	1.7 to 5 µm	PERCENT
fumecheng-12403	139	1	1.8 µm to 4.5 µm	DATE
fumecheng-12403	140	1	mm3/mm2	PRODUCT
fumecheng-12403	141	1	fig	ORG
fumecheng-12403	142	1	6 3d	CARDINAL
fumecheng-12403	142	2	160/125	DATE
fumecheng-12403	142	3	200/250	CARDINAL
fumecheng-12403	142	4	3.8	CARDINAL
fumecheng-12403	144	1	7a	CARDINAL
fumecheng-12403	145	1	468	CARDINAL
fumecheng-12403	145	2	kuznetsov	GPE
fumecheng-12403	145	3	i.v	GPE
fumecheng-12403	145	4	tatarintsev	GPE
fumecheng-12403	145	5	v.v. voropaev	GPE
fumecheng-12403	145	6	korelin fig	PERSON
fumecheng-12403	146	1	7 3d	CARDINAL
fumecheng-12403	146	2	200/250 3.4	CARDINAL
fumecheng-12403	146	3	mm	PERSON
fumecheng-12403	146	4	two	CARDINAL
fumecheng-12403	146	5	275	CARDINAL
fumecheng-12403	146	6	microprotrusions	PERSON
fumecheng-12403	147	1	21	CARDINAL
fumecheng-12403	148	1	fltp	PERSON
fumecheng-12403	148	2	2	CARDINAL
fumecheng-12403	148	3	2	CARDINAL
fumecheng-12403	149	1	n fb=300 n sa	ORG
fumecheng-12403	149	2	244.8 149.7	CARDINAL
fumecheng-12403	149	3	122.5 82.67	CARDINAL
fumecheng-12403	149	4	mm3/mm2	PRODUCT
fumecheng-12403	149	5	10.7610–5	CARDINAL
fumecheng-12403	149	6	13.7410–5	CARDINAL
fumecheng-12403	149	7	fig.	DATE
fumecheng-12403	150	1	8	CARDINAL
fumecheng-12403	150	2	469	CARDINAL
fumecheng-12403	151	1	8 3d	CARDINAL
fumecheng-12403	151	2	power vvv=13.7410–5 mm3/mm2	PRODUCT
fumecheng-12403	153	1	4.	CARDINAL
fumecheng-12403	154	1	nadolny	PERSON
fumecheng-12403	156	1	sa=440	PERSON
fumecheng-12403	156	2	496	CARDINAL
fumecheng-12403	156	3	mm3/mm2.	PRODUCT
fumecheng-12403	157	1	n=1650	DATE
fumecheng-12403	161	1	mm	PERSON
fumecheng-12403	161	2	three	CARDINAL
fumecheng-12403	161	3	657.4	CARDINAL
fumecheng-12403	161	4	sa=73.4	ORG
fumecheng-12403	164	1	0.04	CARDINAL
fumecheng-12403	164	2	0.025	CARDINAL
fumecheng-12403	164	3	0.01 mm	QUANTITY
fumecheng-12403	164	4	150	CARDINAL
fumecheng-12403	164	5	200	CARDINAL
fumecheng-12403	164	6	250 n	QUANTITY
fumecheng-12403	164	7	three	CARDINAL
fumecheng-12403	165	1	470	CARDINAL
fumecheng-12403	165	2	kuznetsov	GPE
fumecheng-12403	165	3	i.v	GPE
fumecheng-12403	165	4	tatarintsev	GPE
fumecheng-12403	165	5	v.v. voropaev	GPE
fumecheng-12403	165	6	mm	PERSON
fumecheng-12403	166	1	1035.5	CARDINAL
fumecheng-12403	166	2	11.2	CARDINAL
fumecheng-12403	167	1	595	CARDINAL
fumecheng-12403	168	1	0.01 mm	QUANTITY
fumecheng-12403	168	2	250	CARDINAL
fumecheng-12403	168	3	3293	CARDINAL
fumecheng-12403	168	4	33182	CARDINAL
fumecheng-12403	171	1	microprotrusions	PERSON
fumecheng-12403	174	1	200/250	CARDINAL
fumecheng-12403	174	2	15.5	CARDINAL
fumecheng-12403	174	3	250	CARDINAL
fumecheng-12403	174	4	3.8	CARDINAL
fumecheng-12403	174	5	8.1 μm	CARDINAL
fumecheng-12403	174	6	vvv=59.0710–5 mm3/mm2	PRODUCT
fumecheng-12403	175	1	2	CARDINAL
fumecheng-12403	176	1	6 mm	QUANTITY
fumecheng-12403	176	2	force fb=300 n	LOC
fumecheng-12403	176	3	mm	PERSON
fumecheng-12403	177	1	1.7	CARDINAL
fumecheng-12403	177	2	13.7410–5	CARDINAL
fumecheng-12403	177	3	mm3/mm2	PRODUCT
fumecheng-12403	178	1	605	CARDINAL
fumecheng-12403	180	1	mm	PERSON
fumecheng-12403	180	2	30.6	CARDINAL
fumecheng-12403	180	3	1386.9	CARDINAL
fumecheng-12403	181	1	22	CARDINAL
fumecheng-12403	181	2	23	CARDINAL
fumecheng-12403	183	1	the ministry of science	ORG
fumecheng-12403	183	2	the russian federation	ORG
fumecheng-12403	183	3	ural federal university	ORG
fumecheng-12403	183	4	075-03-2023-006	QUANTITY
fumecheng-12403	183	5	16.01.2023	DATE
fumecheng-12403	183	6	feuz-2024-0020	DATE
fumecheng-12403	184	1	471	CARDINAL
fumecheng-12403	184	2	1	CARDINAL
fumecheng-12403	184	3	pawlus	PERSON
fumecheng-12403	184	4	r.	NORP
fumecheng-12403	184	5	wieczorowski	PERSON
fumecheng-12403	184	6	m.	PERSON
fumecheng-12403	184	7	2021	DATE
fumecheng-12403	184	8	72	DATE
fumecheng-12403	185	1	807	CARDINAL
fumecheng-12403	186	1	2	CARDINAL
fumecheng-12403	186	2	w.	PERSON
fumecheng-12403	186	3	ochwat	GPE
fumecheng-12403	186	4	s., 2013, possibilities of	ORG
fumecheng-12403	186	5	13(4	DATE
fumecheng-12403	187	1	465-471	CARDINAL
fumecheng-12403	188	1	3	CARDINAL
fumecheng-12403	188	2	mezghani	GPE
fumecheng-12403	188	3	s., demirci	PERSON
fumecheng-12403	188	4	i.	GPE
fumecheng-12403	188	5	m., mansori	PERSON
fumecheng-12403	188	6	e.m.	GPE
fumecheng-12403	188	7	2013	DATE
fumecheng-12403	188	8	302(1	CARDINAL
fumecheng-12403	189	1	1360-1369	CARDINAL
fumecheng-12403	190	1	4	CARDINAL
fumecheng-12403	190	2	zhang	PERSON
fumecheng-12403	190	3	y.k.	GPE
fumecheng-12403	190	4	yang	GPE
fumecheng-12403	190	5	c.j.	GPE
fumecheng-12403	190	6	fu	NORP
fumecheng-12403	190	7	y.h.	GPE
fumecheng-12403	190	8	zhou	PERSON
fumecheng-12403	190	9	j.z.	GPE
fumecheng-12403	190	10	hua	ORG
fumecheng-12403	190	11	x.j.	GPE
fumecheng-12403	190	12	j.h.	GPE
fumecheng-12403	190	13	2008	DATE
fumecheng-12403	190	14	359-360	CARDINAL
fumecheng-12403	191	1	340-343	CARDINAL
fumecheng-12403	192	1	molnár	PERSON
fumecheng-12403	192	2	2022	CARDINAL
fumecheng-12403	192	3	3d	CARDINAL
fumecheng-12403	192	4	2505	DATE
fumecheng-12403	193	1	6	CARDINAL
fumecheng-12403	193	2	molnár	PERSON
fumecheng-12403	193	3	2022	CARDINAL
fumecheng-12403	193	4	96	DATE
fumecheng-12403	194	1	65-72	DATE
fumecheng-12403	195	1	nadolny	PERSON
fumecheng-12403	195	2	w.	PERSON
fumecheng-12403	195	3	2014	DATE
fumecheng-12403	195	4	14(4	CARDINAL
fumecheng-12403	197	1	204-212	CARDINAL
fumecheng-12403	198	1	kuznetsov	GPE
fumecheng-12403	198	2	v.p.	GPE
fumecheng-12403	198	3	makarov	ORG
fumecheng-12403	198	4	a.v.	GPE
fumecheng-12403	198	5	s.g.	GPE
fumecheng-12403	198	6	r.a.	GPE
fumecheng-12403	198	7	malygina i.yu	PERSON
fumecheng-12403	198	8	davydova n.a.	PERSON
fumecheng-12403	198	9	2014	DATE
fumecheng-12403	198	10	17	DATE
fumecheng-12403	199	1	250–264	LANGUAGE
fumecheng-12403	200	1	patel	PERSON
fumecheng-12403	200	2	n.s.	GPE
fumecheng-12403	200	3	parihar	PERSON
fumecheng-12403	200	4	p.l.	GPE
fumecheng-12403	200	5	makawana	PERSON
fumecheng-12403	200	6	j.s.	GPE
fumecheng-12403	200	7	2021	CARDINAL
fumecheng-12403	200	8	today	DATE
fumecheng-12403	200	9	47(11	DATE
fumecheng-12403	202	1	10	CARDINAL
fumecheng-12403	202	2	sakthivelu	ORG
fumecheng-12403	202	3	s.	PERSON
fumecheng-12403	202	4	anandaraj	GPE
fumecheng-12403	202	5	t.	GPE
fumecheng-12403	202	6	2017	DATE
fumecheng-12403	202	7	cnc	ORG
fumecheng-12403	202	8	5	CARDINAL
fumecheng-12403	202	9	13	CARDINAL
fumecheng-12403	203	1	1-5	CARDINAL
fumecheng-12403	203	2	11	CARDINAL
fumecheng-12403	204	1	krishnaprakasha	ORG
fumecheng-12403	204	2	a.	PERSON
fumecheng-12403	204	3	2018	DATE
fumecheng-12403	204	4	1200	CARDINAL
fumecheng-12403	204	5	15(3	CARDINAL
fumecheng-12403	205	1	77-84	CARDINAL
fumecheng-12403	206	1	12	CARDINAL
fumecheng-12403	207	1	patel	PERSON
fumecheng-12403	207	2	r.	NORP
fumecheng-12403	207	3	patel	PERSON
fumecheng-12403	207	4	patel	PERSON
fumecheng-12403	207	5	j.	PERSON
fumecheng-12403	207	6	2021	DATE
fumecheng-12403	207	7	taguchi	ORG
fumecheng-12403	207	8	cnc	ORG
fumecheng-12403	207	9	today	DATE
fumecheng-12403	207	10	44(1	CARDINAL
fumecheng-12403	208	1	2325-2329	CARDINAL
fumecheng-12403	209	1	13	CARDINAL
fumecheng-12403	209	2	kuznetsov	GPE
fumecheng-12403	209	3	v.p.	GPE
fumecheng-12403	209	4	dmitriev	PERSON
fumecheng-12403	209	5	a.i.	GPE
fumecheng-12403	209	6	anisimova	GPE
fumecheng-12403	209	7	g.s.	GPE
fumecheng-12403	209	8	semenova	PERSON
fumecheng-12403	209	9	2016	DATE
fumecheng-12403	209	10	taguchi method	ORG
fumecheng-12403	209	11	124	CARDINAL
fumecheng-12403	209	12	012022	DATE
fumecheng-12403	210	1	14	DATE
fumecheng-12403	211	1	kuznetsov	GPE
fumecheng-12403	211	2	v.p.	GPE
fumecheng-12403	211	3	v.g.	GPE
fumecheng-12403	211	4	i.a.	GPE
fumecheng-12403	211	5	a.s.	GPE
fumecheng-12403	211	6	kosareva	PERSON
fumecheng-12403	211	7	a.v.	GPE
fumecheng-12403	211	8	2023	CARDINAL
fumecheng-12403	211	9	aip	ORG
fumecheng-12403	211	10	2899	CARDINAL
fumecheng-12403	211	11	020085	DATE
fumecheng-12403	212	1	15	CARDINAL
fumecheng-12403	213	1	jacobs	PERSON
fumecheng-12403	213	2	t.	GPE
fumecheng-12403	213	3	t., pastewka	ORG
fumecheng-12403	213	4	l.	GPE
fumecheng-12403	213	5	2017	DATE
fumecheng-12403	213	6	5	CARDINAL
fumecheng-12403	213	7	013001	DATE
fumecheng-12403	214	1	16	CARDINAL
fumecheng-12403	214	2	peresadko	NORP
fumecheng-12403	214	3	a.g.	GPE
fumecheng-12403	214	4	n., persson	ORG
fumecheng-12403	214	5	b.n.j	GPE
fumecheng-12403	214	6	2005	DATE
fumecheng-12403	214	7	95, 124301	DATE
fumecheng-12403	215	1	17	CARDINAL
fumecheng-12403	216	1	r.	NORP
fumecheng-12403	216	2	popov	PERSON
fumecheng-12403	216	3	v.l.	GPE
fumecheng-12403	216	4	2012	DATE
fumecheng-12403	216	5	108	CARDINAL
fumecheng-12403	216	6	104301	DATE
fumecheng-12403	217	1	18	CARDINAL
fumecheng-12403	218	1	popov	PERSON
fumecheng-12403	218	2	v.l.	GPE
fumecheng-12403	218	3	r.	NORP
fumecheng-12403	218	4	2018	DATE
fumecheng-12403	218	5	6	CARDINAL
fumecheng-12403	219	1	260–273	CARDINAL
fumecheng-12403	220	1	19	CARDINAL
fumecheng-12403	221	1	k., 2018	PERSON
fumecheng-12403	221	2	42(1	CARDINAL
fumecheng-12403	223	1	43	CARDINAL
fumecheng-12403	224	1	20	CARDINAL
fumecheng-12403	225	1	martins	PERSON
fumecheng-12403	225	2	oliveira	PERSON
fumecheng-12403	225	3	d.a.	PERSON
fumecheng-12403	225	4	de castro magalhães	PERSON
fumecheng-12403	225	5	f.	PERSON
fumecheng-12403	225	6	2023	CARDINAL
fumecheng-12403	225	7	aisi 4140	PERSON
fumecheng-12403	225	8	129	CARDINAL
fumecheng-12403	225	9	1127-1143	CARDINAL
fumecheng-12403	226	1	2003	DATE
fumecheng-12403	226	2	1	CARDINAL
fumecheng-12403	227	1	iso	PERSON
fumecheng-12403	227	2	12781-1:2003	DATE
fumecheng-12403	227	3	22	CARDINAL
fumecheng-12403	228	1	popov	PERSON
fumecheng-12403	228	2	m.	PERSON
fumecheng-12403	228	3	2021	DATE
fumecheng-12403	228	4	19(1	CARDINAL
fumecheng-12403	229	1	105-113	CARDINAL
fumecheng-12403	230	1	23	CARDINAL
fumecheng-12403	231	1	balokhonov	GPE
fumecheng-12403	231	2	r.	NORP
fumecheng-12403	231	3	romanova	PERSON
fumecheng-12403	231	4	2022	CARDINAL
fumecheng-12403	231	5	29(16	DATE
fumecheng-12403	231	6	2390-2403	DATE