id	sid	eid	entity	type
fumecheng-14015	1	1	14015	CARDINAL
fumecheng-14015	1	2	23	CARDINAL
fumecheng-14015	1	3	2025	DATE
fumecheng-14015	2	1	921 943	CARDINAL
fumecheng-14015	2	2	2025	CARDINAL
fumecheng-14015	2	3	university of niš	ORG
fumecheng-14015	2	4	serbia	GPE
fumecheng-14015	2	5	article cu-cu	ORG
fumecheng-14015	2	6	3d	CARDINAL
fumecheng-14015	2	7	chih-ming chen2	PERSON
fumecheng-14015	3	1	chung-ang university	ORG
fumecheng-14015	3	2	korea	GPE
fumecheng-14015	4	1	2department	TIME
fumecheng-14015	4	2	chung hsing university	ORG
fumecheng-14015	4	3	chung-ang university	ORG
fumecheng-14015	4	4	korea	GPE
fumecheng-14015	4	5	sooyong choi https://orcid.org/0009-0004-1523-4122 chih-ming chen	PERSON
fumecheng-14015	4	6	hwang	PERSON
fumecheng-14015	5	1	three	CARDINAL
fumecheng-14015	5	2	cu-cu	ORG
fumecheng-14015	7	1	cu-cu	ORG
fumecheng-14015	8	1	3d	CARDINAL
fumecheng-14015	9	1	cu-cu	ORG
fumecheng-14015	10	1	cu-cu	ORG
fumecheng-14015	10	2	cu-cu	ORG
fumecheng-14015	11	1	3d	CARDINAL
fumecheng-14015	11	2	1	CARDINAL
fumecheng-14015	12	1	the past few decades	DATE
fumecheng-14015	13	1	august 30, 2025	DATE
fumecheng-14015	13	2	november 10, 2025	DATE
fumecheng-14015	13	3	chung-ang university	ORG
fumecheng-14015	13	4	06974	DATE
fumecheng-14015	13	5	922 s. choi	PERSON
fumecheng-14015	13	6	c. chen	PERSON
fumecheng-14015	13	7	b. hwang	PERSON
fumecheng-14015	14	1	1-3	CARDINAL
fumecheng-14015	15	1	4	CARDINAL
fumecheng-14015	16	1	three	CARDINAL
fumecheng-14015	16	2	3d	CARDINAL
fumecheng-14015	16	3	recent years	DATE
fumecheng-14015	17	1	3d	CARDINAL
fumecheng-14015	17	2	hbm	LOC
fumecheng-14015	18	1	5	CARDINAL
fumecheng-14015	19	1	16	CARDINAL
fumecheng-14015	19	2	32	CARDINAL
fumecheng-14015	20	1	9	CARDINAL
fumecheng-14015	21	1	3d	CARDINAL
fumecheng-14015	22	1	14	CARDINAL
fumecheng-14015	23	1	cu-cu	ORG
fumecheng-14015	24	1	cu	ORG
fumecheng-14015	25	1	cu-cu	ORG
fumecheng-14015	25	2	3d	CARDINAL
fumecheng-14015	25	3	19	CARDINAL
fumecheng-14015	26	1	cu-cu	ORG
fumecheng-14015	26	2	two	CARDINAL
fumecheng-14015	28	1	cu-cu	ORG
fumecheng-14015	29	1	25	CARDINAL
fumecheng-14015	30	1	28	CARDINAL
fumecheng-14015	31	1	cu-cu	ORG
fumecheng-14015	32	1	cu-cu	ORG
fumecheng-14015	33	1	cu-cu	ORG
fumecheng-14015	34	1	cu-cu	ORG
fumecheng-14015	34	2	cu-cu	ORG
fumecheng-14015	35	1	2	CARDINAL
fumecheng-14015	35	2	cu-cu	ORG
fumecheng-14015	35	3	28	CARDINAL
fumecheng-14015	37	1	the cu-cu	ORG
fumecheng-14015	37	2	39	CARDINAL
fumecheng-14015	38	1	50	CARDINAL
fumecheng-14015	39	1	y kdσσ	PERSON
fumecheng-14015	39	2	1	CARDINAL
fumecheng-14015	39	3	40	CARDINAL
fumecheng-14015	40	1	cu-cu	ORG
fumecheng-14015	40	2	3d	CARDINAL
fumecheng-14015	40	3	923	CARDINAL
fumecheng-14015	41	1	41	CARDINAL
fumecheng-14015	41	2	petch	GPE
fumecheng-14015	43	1	1	CARDINAL
fumecheng-14015	45	1	0 ppm	MONEY
fumecheng-14015	46	1	0.29 μm	CARDINAL
fumecheng-14015	46	2	1	CARDINAL
fumecheng-14015	47	1	1	CARDINAL
fumecheng-14015	48	1	2	CARDINAL
fumecheng-14015	50	1	1	CARDINAL
fumecheng-14015	51	1	1	CARDINAL
fumecheng-14015	51	2	0.55	CARDINAL
fumecheng-14015	52	1	1	CARDINAL
fumecheng-14015	53	1	oim	PERSON
fumecheng-14015	53	2	41	CARDINAL
fumecheng-14015	53	3	c. chen	PERSON
fumecheng-14015	53	4	b. hwang	PERSON
fumecheng-14015	53	5	2	CARDINAL
fumecheng-14015	53	6	351	CARDINAL
fumecheng-14015	53	7	416	CARDINAL
fumecheng-14015	53	8	±	CARDINAL
fumecheng-14015	53	9	261	CARDINAL
fumecheng-14015	53	10	2.9 ±	MONEY
fumecheng-14015	53	11	4.3 ± 0.3 7.2 ±	QUANTITY
fumecheng-14015	53	12	0.4	CARDINAL
fumecheng-14015	54	1	42	CARDINAL
fumecheng-14015	54	2	two	CARDINAL
fumecheng-14015	54	3	11	CARDINAL
fumecheng-14015	54	4	28	CARDINAL
fumecheng-14015	55	1	3	CARDINAL
fumecheng-14015	55	2	5	CARDINAL
fumecheng-14015	55	3	3 mpa	QUANTITY
fumecheng-14015	55	4	42	CARDINAL
fumecheng-14015	57	1	cu	GPE
fumecheng-14015	60	1	2	CARDINAL
fumecheng-14015	60	2	43	CARDINAL
fumecheng-14015	62	1	2	CARDINAL
fumecheng-14015	64	1	two	CARDINAL
fumecheng-14015	65	1	gui et al	PERSON
fumecheng-14015	66	1	44	CARDINAL
fumecheng-14015	67	1	45	CARDINAL
fumecheng-14015	69	1	39	CARDINAL
fumecheng-14015	69	2	8.0	CARDINAL
fumecheng-14015	69	3	1.5	CARDINAL
fumecheng-14015	71	1	46	CARDINAL
fumecheng-14015	71	2	approximately 0.3	CARDINAL
fumecheng-14015	72	1	∼3×10⁻³ pa	FAC
fumecheng-14015	72	2	50	CARDINAL
fumecheng-14015	73	1	cu-cu	ORG
fumecheng-14015	74	1	cu-cu	ORG
fumecheng-14015	75	1	26	CARDINAL
fumecheng-14015	77	1	fick	PERSON
fumecheng-14015	77	2	first	ORDINAL
fumecheng-14015	78	1	47	CARDINAL
fumecheng-14015	82	1	two	CARDINAL
fumecheng-14015	83	1	jang et al	PERSON
fumecheng-14015	84	1	48	CARDINAL
fumecheng-14015	84	2	cu-cu	ORG
fumecheng-14015	85	1	300	CARDINAL
fumecheng-14015	85	2	350	CARDINAL
fumecheng-14015	85	3	400 °	QUANTITY
fumecheng-14015	85	4	1	CARDINAL
fumecheng-14015	86	1	cu-cu	ORG
fumecheng-14015	86	2	3d	CARDINAL
fumecheng-14015	86	3	925	CARDINAL
fumecheng-14015	87	1	400 °	QUANTITY
fumecheng-14015	88	1	cu-cu	ORG
fumecheng-14015	88	2	28	CARDINAL
fumecheng-14015	88	3	49	DATE
fumecheng-14015	88	4	50	CARDINAL
fumecheng-14015	91	1	200	CARDINAL
fumecheng-14015	91	2	250	CARDINAL
fumecheng-14015	91	3	300 °	QUANTITY
fumecheng-14015	91	4	1	CARDINAL
fumecheng-14015	92	1	200 °	QUANTITY
fumecheng-14015	92	2	250 and 300	QUANTITY
fumecheng-14015	93	1	3.1	CARDINAL
fumecheng-14015	93	2	4.3	CARDINAL
fumecheng-14015	93	3	48	CARDINAL
fumecheng-14015	94	1	48	CARDINAL
fumecheng-14015	95	1	lin et al	PERSON
fumecheng-14015	96	1	51	CARDINAL
fumecheng-14015	96	2	cu-cu	ORG
fumecheng-14015	96	3	nanotwinned cu	ORG
fumecheng-14015	96	4	150	CARDINAL
fumecheng-14015	96	5	200 °	QUANTITY
fumecheng-14015	98	1	2	CARDINAL
fumecheng-14015	98	2	150 °	QUANTITY
fumecheng-14015	98	3	60 min	DATE
fumecheng-14015	99	1	2	CARDINAL
fumecheng-14015	99	2	200 °	QUANTITY
fumecheng-14015	99	3	30 min	DATE
fumecheng-14015	99	4	the cu-cu	ORG
fumecheng-14015	100	1	150	CARDINAL
fumecheng-14015	102	1	2	CARDINAL
fumecheng-14015	102	2	200 °	QUANTITY
fumecheng-14015	102	3	only 5 min	TIME
fumecheng-14015	103	1	fig	ORG
fumecheng-14015	104	1	2	CARDINAL
fumecheng-14015	104	2	150	CARDINAL
fumecheng-14015	104	3	60 min	TIME
fumecheng-14015	104	4	200	CARDINAL
fumecheng-14015	104	5	5 min	DATE
fumecheng-14015	105	1	200	CARDINAL
fumecheng-14015	105	2	30 min	TIME
fumecheng-14015	106	1	51	CARDINAL
fumecheng-14015	106	2	926	CARDINAL
fumecheng-14015	106	3	c. chen	PERSON
fumecheng-14015	106	4	b. hwang li et al	PERSON
fumecheng-14015	107	1	52	CARDINAL
fumecheng-14015	107	2	cu nanosolder	ORG
fumecheng-14015	108	1	the cu-cu	ORG
fumecheng-14015	109	1	53	CARDINAL
fumecheng-14015	109	2	54	DATE
fumecheng-14015	110	1	55	CARDINAL
fumecheng-14015	111	1	cu-cu	ORG
fumecheng-14015	112	1	56	CARDINAL
fumecheng-14015	114	1	57	CARDINAL
fumecheng-14015	114	2	cu-cu	ORG
fumecheng-14015	116	1	30	CARDINAL
fumecheng-14015	116	2	20	CARDINAL
fumecheng-14015	117	1	200 to 300 °	QUANTITY
fumecheng-14015	118	1	three	CARDINAL
fumecheng-14015	118	2	58	CARDINAL
fumecheng-14015	120	1	58	CARDINAL
fumecheng-14015	120	2	59	CARDINAL
fumecheng-14015	124	1	58	CARDINAL
fumecheng-14015	125	1	58	CARDINAL
fumecheng-14015	125	2	61-63	CARDINAL
fumecheng-14015	126	1	200 °	QUANTITY
fumecheng-14015	126	2	30	CARDINAL
fumecheng-14015	130	1	200 °	QUANTITY
fumecheng-14015	130	2	30–120 min	DATE
fumecheng-14015	132	1	nanocrystalline cu	ORG
fumecheng-14015	132	2	64	CARDINAL
fumecheng-14015	133	1	nanocrystalline cu	ORG
fumecheng-14015	135	1	cu-cu	ORG
fumecheng-14015	136	1	cu-cu	ORG
fumecheng-14015	136	2	3d	CARDINAL
fumecheng-14015	137	1	927	CARDINAL
fumecheng-14015	137	2	cu-cu	ORG
fumecheng-14015	137	3	four	CARDINAL
fumecheng-14015	140	1	≈ 300–400 °	QUANTITY
fumecheng-14015	140	2	several tens	CARDINAL
fumecheng-14015	143	1	3	CARDINAL
fumecheng-14015	143	2	cu-cu	ORG
fumecheng-14015	143	3	3.1	CARDINAL
fumecheng-14015	144	1	two	CARDINAL
fumecheng-14015	144	2	21-25 °	TIME
fumecheng-14015	144	3	60-64	CARDINAL
fumecheng-14015	145	1	sab	ORG
fumecheng-14015	147	1	kim et al	PERSON
fumecheng-14015	148	1	60	CARDINAL
fumecheng-14015	150	1	1	CARDINAL
fumecheng-14015	150	2	60	CARDINAL
fumecheng-14015	152	1	sab	PERSON
fumecheng-14015	153	1	62	CARDINAL
fumecheng-14015	155	1	3	CARDINAL
fumecheng-14015	156	1	two	CARDINAL
fumecheng-14015	157	1	cu-cu	ORG
fumecheng-14015	157	2	sab technology	ORG
fumecheng-14015	158	1	cu-cu	ORG
fumecheng-14015	160	1	aes	ORG
fumecheng-14015	161	1	approximately 15 min	TIME
fumecheng-14015	161	2	928 s. choi	PERSON
fumecheng-14015	161	3	c. chen	PERSON
fumecheng-14015	161	4	b. hwang	PERSON
fumecheng-14015	163	1	fig	ORG
fumecheng-14015	164	1	3	CARDINAL
fumecheng-14015	164	2	6.47	CARDINAL
fumecheng-14015	165	1	cu-cu	ORG
fumecheng-14015	166	1	shigetou et al	PERSON
fumecheng-14015	167	1	65	CARDINAL
fumecheng-14015	167	2	6	CARDINAL
fumecheng-14015	167	3	20	CARDINAL
fumecheng-14015	167	4	66	CARDINAL
fumecheng-14015	168	1	3.2	CARDINAL
fumecheng-14015	168	2	cu-cu	ORG
fumecheng-14015	168	3	67	CARDINAL
fumecheng-14015	169	1	cu	ORG
fumecheng-14015	169	2	less than 1	CARDINAL
fumecheng-14015	169	3	71	CARDINAL
fumecheng-14015	171	1	72-75	CARDINAL
fumecheng-14015	176	1	76	CARDINAL
fumecheng-14015	177	1	fig	ORG
fumecheng-14015	178	1	4	CARDINAL
fumecheng-14015	178	2	two	CARDINAL
fumecheng-14015	179	1	cu-cu	ORG
fumecheng-14015	179	2	3d	CARDINAL
fumecheng-14015	179	3	929	CARDINAL
fumecheng-14015	181	1	4	CARDINAL
fumecheng-14015	187	1	three	CARDINAL
fumecheng-14015	188	1	fig	ORG
fumecheng-14015	189	1	4	CARDINAL
fumecheng-14015	193	1	fig	ORG
fumecheng-14015	194	1	4	CARDINAL
fumecheng-14015	194	2	76	CARDINAL
fumecheng-14015	195	1	77	CARDINAL
fumecheng-14015	197	1	5	CARDINAL
fumecheng-14015	198	1	930	CARDINAL
fumecheng-14015	198	2	c. chen	PERSON
fumecheng-14015	198	3	b. hwang	PERSON
fumecheng-14015	198	4	98%	PERCENT
fumecheng-14015	198	5	approximately 1%	PERCENT
fumecheng-14015	198	6	99%	PERCENT
fumecheng-14015	199	1	cu	ORG
fumecheng-14015	199	2	200 °	QUANTITY
fumecheng-14015	201	1	200 °	QUANTITY
fumecheng-14015	204	1	5	CARDINAL
fumecheng-14015	204	2	200 °	QUANTITY
fumecheng-14015	205	1	less than 10	CARDINAL
fumecheng-14015	206	1	between 100 and 150	CARDINAL
fumecheng-14015	207	1	200 °	QUANTITY
fumecheng-14015	208	1	cu-cu	ORG
fumecheng-14015	208	2	240 °	QUANTITY
fumecheng-14015	208	3	5	CARDINAL
fumecheng-14015	208	4	over 150	CARDINAL
fumecheng-14015	208	5	78	CARDINAL
fumecheng-14015	210	1	5	CARDINAL
fumecheng-14015	211	1	79	CARDINAL
fumecheng-14015	211	2	80	CARDINAL
fumecheng-14015	211	3	81	CARDINAL
fumecheng-14015	211	4	74	CARDINAL
fumecheng-14015	211	5	75	CARDINAL
fumecheng-14015	211	6	65	CARDINAL
fumecheng-14015	211	7	82	CARDINAL
fumecheng-14015	214	1	cu-cu	ORG
fumecheng-14015	214	2	3d	CARDINAL
fumecheng-14015	214	3	931 3.3	CARDINAL
fumecheng-14015	215	1	cu-cu	ORG
fumecheng-14015	215	2	3.3.1	CARDINAL
fumecheng-14015	215	3	sn	ORG
fumecheng-14015	215	4	cu-cu	ORG
fumecheng-14015	215	5	80	CARDINAL
fumecheng-14015	215	6	83	DATE
fumecheng-14015	217	1	84-87	CARDINAL
fumecheng-14015	219	1	84	CARDINAL
fumecheng-14015	222	1	tsai et al	PERSON
fumecheng-14015	223	1	89	CARDINAL
fumecheng-14015	223	2	cu-cu	ORG
fumecheng-14015	224	1	50	CARDINAL
fumecheng-14015	224	2	200	CARDINAL
fumecheng-14015	225	1	2	CARDINAL
fumecheng-14015	226	1	10	CARDINAL
fumecheng-14015	226	2	cu pillar micro bumps	ORG
fumecheng-14015	226	3	5	CARDINAL
fumecheng-14015	227	1	10	CARDINAL
fumecheng-14015	228	1	1.91	CARDINAL
fumecheng-14015	228	2	150 °	QUANTITY
fumecheng-14015	228	3	50 min	DATE
fumecheng-14015	228	4	7	CARDINAL
fumecheng-14015	228	5	1	CARDINAL
fumecheng-14015	229	1	7	CARDINAL
fumecheng-14015	229	2	2	CARDINAL
fumecheng-14015	230	1	89	CARDINAL
fumecheng-14015	232	1	90	CARDINAL
fumecheng-14015	232	2	sn	ORG
fumecheng-14015	232	3	cu-cu	ORG
fumecheng-14015	233	1	sn	ORG
fumecheng-14015	233	2	232 °	QUANTITY
fumecheng-14015	234	1	50	CARDINAL
fumecheng-14015	234	2	300	CARDINAL
fumecheng-14015	234	3	sn	ORG
fumecheng-14015	234	4	1 µm	CARDINAL
fumecheng-14015	234	5	800	CARDINAL
fumecheng-14015	234	6	600	CARDINAL
fumecheng-14015	235	1	50	CARDINAL
fumecheng-14015	235	2	vol% hcl cleans	PERSON
fumecheng-14015	235	3	40 °	QUANTITY
fumecheng-14015	235	4	1 min	QUANTITY
fumecheng-14015	236	1	two	CARDINAL
fumecheng-14015	236	2	220 °	QUANTITY
fumecheng-14015	236	3	sn	ORG
fumecheng-14015	236	4	250 °	QUANTITY
fumecheng-14015	237	1	fig	PERSON
fumecheng-14015	238	1	6	CARDINAL
fumecheng-14015	238	2	sn	ORG
fumecheng-14015	239	1	sn	ORG
fumecheng-14015	239	2	sn	ORG
fumecheng-14015	239	3	imc	GPE
fumecheng-14015	239	4	first	ORDINAL
fumecheng-14015	240	1	932 s. choi	PERSON
fumecheng-14015	240	2	c. chen	PERSON
fumecheng-14015	240	3	b. hwang	PERSON
fumecheng-14015	240	4	sn	ORG
fumecheng-14015	241	1	800	CARDINAL
fumecheng-14015	241	2	sn	ORG
fumecheng-14015	241	3	220 °	QUANTITY
fumecheng-14015	241	4	2	CARDINAL
fumecheng-14015	241	5	imc	GPE
fumecheng-14015	241	6	250 °	QUANTITY
fumecheng-14015	241	7	imc	GPE
fumecheng-14015	242	1	600	CARDINAL
fumecheng-14015	242	2	sn	ORG
fumecheng-14015	242	3	2	CARDINAL
fumecheng-14015	242	4	sn	ORG
fumecheng-14015	244	1	6	CARDINAL
fumecheng-14015	244	2	sn	ORG
fumecheng-14015	244	3	imc	GPE
fumecheng-14015	244	4	the cu-sn	ORG
fumecheng-14015	244	5	sn	ORG
fumecheng-14015	244	6	1	CARDINAL
fumecheng-14015	244	7	250 °	QUANTITY
fumecheng-14015	244	8	1	CARDINAL
fumecheng-14015	245	1	1	CARDINAL
fumecheng-14015	245	2	sn	ORG
fumecheng-14015	245	3	220 °	QUANTITY
fumecheng-14015	245	4	1	CARDINAL
fumecheng-14015	245	5	800	CARDINAL
fumecheng-14015	245	6	250 °	QUANTITY
fumecheng-14015	245	7	2	CARDINAL
fumecheng-14015	245	8	~20–25%	PERCENT
fumecheng-14015	245	9	sn	ORG
fumecheng-14015	245	10	220 °	QUANTITY
fumecheng-14015	245	11	2	CARDINAL
fumecheng-14015	245	12	~37.5%	PERCENT
fumecheng-14015	246	1	6	CARDINAL
fumecheng-14015	248	1	6	CARDINAL
fumecheng-14015	248	2	polish	NORP
fumecheng-14015	248	3	800	CARDINAL
fumecheng-14015	248	4	~37.3%	PERCENT
fumecheng-14015	248	5	800 nm/250 °	QUANTITY
fumecheng-14015	248	6	cu-cu	ORG
fumecheng-14015	248	7	3d	CARDINAL
fumecheng-14015	248	8	933	CARDINAL
fumecheng-14015	248	9	1	CARDINAL
fumecheng-14015	248	10	600 nm/250 °	QUANTITY
fumecheng-14015	249	1	tem	ORG
fumecheng-14015	249	2	1	CARDINAL
fumecheng-14015	250	1	90	CARDINAL
fumecheng-14015	251	1	≥1	ORG
fumecheng-14015	251	2	sn	ORG
fumecheng-14015	251	3	cu-cu	ORG
fumecheng-14015	251	4	250 °	QUANTITY
fumecheng-14015	251	5	1	CARDINAL
fumecheng-14015	251	6	1 min	TIME
fumecheng-14015	252	1	tem	ORG
fumecheng-14015	253	1	sn	ORG
fumecheng-14015	254	1	sn	ORG
fumecheng-14015	254	2	cu-cu	ORG
fumecheng-14015	254	3	3d	CARDINAL
fumecheng-14015	255	1	3.3.2	CARDINAL
fumecheng-14015	255	2	cu-cu	ORG
fumecheng-14015	258	1	one	CARDINAL
fumecheng-14015	259	1	two	CARDINAL
fumecheng-14015	259	2	one	CARDINAL
fumecheng-14015	259	3	91	CARDINAL
fumecheng-14015	260	1	92	CARDINAL
fumecheng-14015	260	2	93	CARDINAL
fumecheng-14015	261	1	liu et al	PERSON
fumecheng-14015	262	1	92	CARDINAL
fumecheng-14015	263	1	150 °	QUANTITY
fumecheng-14015	263	2	30 min	TIME
fumecheng-14015	263	3	0.01 torr	QUANTITY
fumecheng-14015	266	1	0.94	CARDINAL
fumecheng-14015	267	1	approximately 10⁻⁸	TIME
fumecheng-14015	267	2	ω·cm²	PERSON
fumecheng-14015	268	1	liu et al	PERSON
fumecheng-14015	269	1	93	CARDINAL
fumecheng-14015	269	2	70 °	QUANTITY
fumecheng-14015	270	1	15 min	QUANTITY
fumecheng-14015	270	2	100 °	QUANTITY
fumecheng-14015	270	3	180	CARDINAL
fumecheng-14015	270	4	70 °	QUANTITY
fumecheng-14015	271	1	aes	ORG
fumecheng-14015	272	1	2	CARDINAL
fumecheng-14015	272	2	8	CARDINAL
fumecheng-14015	272	3	10	CARDINAL
fumecheng-14015	273	1	3.2	CARDINAL
fumecheng-14015	273	2	2.75	CARDINAL
fumecheng-14015	273	3	2.55	CARDINAL
fumecheng-14015	276	1	934 s. choi	PERSON
fumecheng-14015	276	2	c. chen	PERSON
fumecheng-14015	276	3	b. hwang	PERSON
fumecheng-14015	277	1	11.89	CARDINAL
fumecheng-14015	278	1	3	CARDINAL
fumecheng-14015	278	2	3	CARDINAL
fumecheng-14015	279	1	180	CARDINAL
fumecheng-14015	279	2	200 °	QUANTITY
fumecheng-14015	279	3	180 °	QUANTITY
fumecheng-14015	279	4	150 °	QUANTITY
fumecheng-14015	279	5	120 °	QUANTITY
fumecheng-14015	279	6	100 °	QUANTITY
fumecheng-14015	279	7	70 °	QUANTITY
fumecheng-14015	279	8	60 °	QUANTITY
fumecheng-14015	279	9	0	CARDINAL
fumecheng-14015	280	1	200	CARDINAL
fumecheng-14015	280	2	120 °	QUANTITY
fumecheng-14015	280	3	4	CARDINAL
fumecheng-14015	280	4	4	CARDINAL
fumecheng-14015	280	5	200 °	QUANTITY
fumecheng-14015	280	6	120 °	QUANTITY
fumecheng-14015	280	7	200 °	CARDINAL
fumecheng-14015	280	8	4.69	CARDINAL
fumecheng-14015	281	1	120	CARDINAL
fumecheng-14015	281	2	1.19 cr	MONEY
fumecheng-14015	281	3	200	CARDINAL
fumecheng-14015	281	4	5.11 cr	MONEY
fumecheng-14015	281	5	120	CARDINAL
fumecheng-14015	281	6	1.75	CARDINAL
fumecheng-14015	281	7	4	CARDINAL
fumecheng-14015	281	8	200	CARDINAL
fumecheng-14015	281	9	120 °	QUANTITY
fumecheng-14015	285	1	lee et al	PERSON
fumecheng-14015	286	1	91	CARDINAL
fumecheng-14015	286	2	cu-cu	ORG
fumecheng-14015	286	3	sio₂	ORG
fumecheng-14015	287	1	1	CARDINAL
fumecheng-14015	287	2	180 °	QUANTITY
fumecheng-14015	287	3	200 °	QUANTITY
fumecheng-14015	289	1	first	ORDINAL
fumecheng-14015	289	2	1	CARDINAL
fumecheng-14015	290	1	25	CARDINAL
fumecheng-14015	290	2	100	CARDINAL
fumecheng-14015	290	3	150	CARDINAL
fumecheng-14015	290	4	200 °	QUANTITY
fumecheng-14015	290	5	1	CARDINAL
fumecheng-14015	290	6	cu	ORG
fumecheng-14015	290	7	photoelectron cu-cu	ORG
fumecheng-14015	290	8	3d	CARDINAL
fumecheng-14015	290	9	935	CARDINAL
fumecheng-14015	290	10	xps	ORG
fumecheng-14015	290	11	tem	ORG
fumecheng-14015	291	1	lee et al	PERSON
fumecheng-14015	292	1	91	CARDINAL
fumecheng-14015	295	1	the cu-cu	ORG
fumecheng-14015	296	1	tem	ORG
fumecheng-14015	299	1	fig	ORG
fumecheng-14015	299	2	7	CARDINAL
fumecheng-14015	301	1	91	CARDINAL
fumecheng-14015	301	2	936	CARDINAL
fumecheng-14015	301	3	c. chen	PERSON
fumecheng-14015	301	4	b. hwang 3.4	PERSON
fumecheng-14015	302	1	cu-cu	ORG
fumecheng-14015	302	2	111	CARDINAL
fumecheng-14015	302	3	111	CARDINAL
fumecheng-14015	302	4	cu-cu	ORG
fumecheng-14015	303	1	94-100	CARDINAL
fumecheng-14015	304	1	cu-cu	ORG
fumecheng-14015	304	2	250 °	QUANTITY
fumecheng-14015	305	1	101	CARDINAL
fumecheng-14015	306	1	5	CARDINAL
fumecheng-14015	306	2	111	CARDINAL
fumecheng-14015	306	3	three	CARDINAL
fumecheng-14015	306	4	four	CARDINAL
fumecheng-14015	307	1	111	CARDINAL
fumecheng-14015	308	1	111	CARDINAL
fumecheng-14015	309	1	97%	PERCENT
fumecheng-14015	309	2	111)-oriented	CARDINAL
fumecheng-14015	309	3	cu	ORG
fumecheng-14015	309	4	100	CARDINAL
fumecheng-14015	309	5	200	CARDINAL
fumecheng-14015	309	6	8-inch	QUANTITY
fumecheng-14015	309	7	300	CARDINAL
fumecheng-14015	310	1	111)-oriented	CARDINAL
fumecheng-14015	311	1	111)-oriented	CARDINAL
fumecheng-14015	312	1	5	CARDINAL
fumecheng-14015	312	2	111	CARDINAL
fumecheng-14015	312	3	100	CARDINAL
fumecheng-14015	312	4	110	CARDINAL
fumecheng-14015	312	5	150 to 300 °	QUANTITY
fumecheng-14015	313	1	111	CARDINAL
fumecheng-14015	313	2	100	CARDINAL
fumecheng-14015	313	3	110	CARDINAL
fumecheng-14015	314	1	300 °	QUANTITY
fumecheng-14015	314	2	1.22×10-5	DATE
fumecheng-14015	314	3	9.42×10-6 1.19×10	CARDINAL
fumecheng-14015	314	4	6.85×10	CARDINAL
fumecheng-14015	314	5	cu-cu	ORG
fumecheng-14015	314	6	at least one	CARDINAL
fumecheng-14015	314	7	111	CARDINAL
fumecheng-14015	315	1	111	CARDINAL
fumecheng-14015	316	1	101	CARDINAL
fumecheng-14015	318	1	150 °	QUANTITY
fumecheng-14015	318	2	1	CARDINAL
fumecheng-14015	318	3	200 °	QUANTITY
fumecheng-14015	318	4	30 min or	TIME
fumecheng-14015	318	5	250 °	QUANTITY
fumecheng-14015	318	6	10 min	TIME
fumecheng-14015	318	7	ebsd	PERSON
fumecheng-14015	319	1	five 2×2	CARDINAL
fumecheng-14015	319	2	97%	PERCENT
fumecheng-14015	319	3	111)-oriented	CARDINAL
fumecheng-14015	319	4	200 °	QUANTITY
fumecheng-14015	319	5	1	CARDINAL
fumecheng-14015	320	1	three	CARDINAL
fumecheng-14015	320	2	five	CARDINAL
fumecheng-14015	320	3	4.3	CARDINAL
fumecheng-14015	320	4	two	CARDINAL
fumecheng-14015	320	5	2.7	CARDINAL
fumecheng-14015	320	6	1.3	CARDINAL
fumecheng-14015	322	1	102	CARDINAL
fumecheng-14015	322	2	cu-cu	ORG
fumecheng-14015	322	3	300 °	QUANTITY
fumecheng-14015	322	4	only 10	CARDINAL
fumecheng-14015	322	5	111	CARDINAL
fumecheng-14015	324	1	8-inch	QUANTITY
fumecheng-14015	324	2	≈ 5	CARDINAL
fumecheng-14015	324	3	30	CARDINAL
fumecheng-14015	324	4	300 °	QUANTITY
fumecheng-14015	324	5	approximately 90	CARDINAL
fumecheng-14015	325	1	10	CARDINAL
fumecheng-14015	326	1	kelvin	PERSON
fumecheng-14015	326	2	approximately 4.4–4.9 mω	QUANTITY
fumecheng-14015	326	3	10–60	CARDINAL
fumecheng-14015	326	4	111	CARDINAL
fumecheng-14015	326	5	300 °	QUANTITY
fumecheng-14015	326	6	cu-cu	ORG
fumecheng-14015	326	7	about 40%	PERCENT
fumecheng-14015	327	1	cu-cu	ORG
fumecheng-14015	327	2	3d	CARDINAL
fumecheng-14015	328	1	937	CARDINAL
fumecheng-14015	329	1	103	CARDINAL
fumecheng-14015	329	2	6 μm-thick	QUANTITY
fumecheng-14015	329	3	111	CARDINAL
fumecheng-14015	329	4	111)-oriented	CARDINAL
fumecheng-14015	329	5	nanotwinned cu	ORG
fumecheng-14015	331	1	about 0.2 μm	CARDINAL
fumecheng-14015	331	2	111	CARDINAL
fumecheng-14015	332	1	cu-cu tcb	ORG
fumecheng-14015	332	2	200–300 °	QUANTITY
fumecheng-14015	332	3	lu et al	PERSON
fumecheng-14015	333	1	103	CARDINAL
fumecheng-14015	333	2	300 °	QUANTITY
fumecheng-14015	335	1	fig	ORG
fumecheng-14015	336	1	8	CARDINAL
fumecheng-14015	338	1	oim	PERSON
fumecheng-14015	341	1	oim	PERSON
fumecheng-14015	343	1	103	CARDINAL
fumecheng-14015	344	1	9	CARDINAL
fumecheng-14015	344	2	cu-cu	ORG
fumecheng-14015	344	3	300 °	QUANTITY
fumecheng-14015	345	1	111)-textured	CARDINAL
fumecheng-14015	346	1	938	CARDINAL
fumecheng-14015	346	2	c. chen	PERSON
fumecheng-14015	346	3	b. hwang 9	PERSON
fumecheng-14015	347	1	9	CARDINAL
fumecheng-14015	348	1	111)-based	CARDINAL
fumecheng-14015	348	2	cu-cu	ORG
fumecheng-14015	348	3	lu et al	PERSON
fumecheng-14015	349	1	103	CARDINAL
fumecheng-14015	349	2	around 300 °	QUANTITY
fumecheng-14015	349	3	111	CARDINAL
fumecheng-14015	350	1	fig	ORG
fumecheng-14015	351	1	9	CARDINAL
fumecheng-14015	351	2	300 °	QUANTITY
fumecheng-14015	351	3	1	CARDINAL
fumecheng-14015	351	4	103	CARDINAL
fumecheng-14015	351	5	4	CARDINAL
fumecheng-14015	351	6	cu-cu	ORG
fumecheng-14015	352	1	cu-cu	ORG
fumecheng-14015	356	1	the cu-cu	ORG
fumecheng-14015	356	2	6	CARDINAL
fumecheng-14015	358	1	cu-cu	ORG
fumecheng-14015	358	2	cu-cu	ORG
fumecheng-14015	358	3	3d	CARDINAL
fumecheng-14015	359	1	939	CARDINAL
fumecheng-14015	360	1	3d	CARDINAL
fumecheng-14015	360	2	111	CARDINAL
fumecheng-14015	360	3	nanocrystalline cu	ORG
fumecheng-14015	361	1	next-generation three	DATE
fumecheng-14015	362	1	6	CARDINAL
fumecheng-14015	362	2	cu-cu	ORG
fumecheng-14015	362	3	sab 200 °	PERSON
fumecheng-14015	362	4	60	CARDINAL
fumecheng-14015	362	5	250	CARDINAL
fumecheng-14015	363	1	65	CARDINAL
fumecheng-14015	363	2	74	DATE
fumecheng-14015	363	3	75	DATE
fumecheng-14015	363	4	77	DATE
fumecheng-14015	363	5	80	CARDINAL
fumecheng-14015	363	6	150 °	QUANTITY
fumecheng-14015	363	7	89	CARDINAL
fumecheng-14015	363	8	120 °	QUANTITY
fumecheng-14015	363	9	imc	GPE
fumecheng-14015	364	1	92	CARDINAL
fumecheng-14015	364	2	111	CARDINAL
fumecheng-14015	364	3	150 °	QUANTITY
fumecheng-14015	364	4	101	CARDINAL
fumecheng-14015	364	5	102	CARDINAL
fumecheng-14015	364	6	the national research foundation	ORG
fumecheng-14015	364	7	korea	GPE
fumecheng-14015	364	8	the ministry of science	ORG
fumecheng-14015	364	9	msit	PERSON
fumecheng-14015	364	10	rs-2023-00257595	ORG
fumecheng-14015	365	1	1	CARDINAL
fumecheng-14015	366	1	zhao	PERSON
fumecheng-14015	366	2	g.	PERSON
fumecheng-14015	366	3	wu	PERSON
fumecheng-14015	366	4	b.	PERSON
fumecheng-14015	366	5	2024	DATE
fumecheng-14015	366	6	3d	CARDINAL
fumecheng-14015	366	7	2(4	CARDINAL
fumecheng-14015	367	1	60-65	CARDINAL
fumecheng-14015	368	1	2	CARDINAL
fumecheng-14015	368	2	r.	NORP
fumecheng-14015	368	3	cheng	PERSON
fumecheng-14015	368	4	wilkerson	GPE
fumecheng-14015	368	5	b.	GPE
fumecheng-14015	368	6	r.	NORP
fumecheng-14015	368	7	wuu	PERSON
fumecheng-14015	368	8	j.	GPE
fumecheng-14015	368	9	mandalapu	GPE
fumecheng-14015	368	10	c.	PERSON
fumecheng-14015	368	11	2022	CARDINAL
fumecheng-14015	368	12	3d	CARDINAL
fumecheng-14015	369	1	2022	CARDINAL
fumecheng-14015	369	2	72nd	ORDINAL
fumecheng-14015	369	3	san diego	GPE
fumecheng-14015	369	4	usa	GPE
fumecheng-14015	369	5	1103-1107	DATE
fumecheng-14015	370	1	3	CARDINAL
fumecheng-14015	370	2	lee	PERSON
fumecheng-14015	370	3	s., jee	PERSON
fumecheng-14015	370	4	s.	GPE
fumecheng-14015	370	5	lee	GPE
fumecheng-14015	370	6	s., hwang	PERSON
fumecheng-14015	370	7	jo	PERSON
fumecheng-14015	370	8	lee	PERSON
fumecheng-14015	370	9	j., jang, a.	ORG
fumecheng-14015	370	10	jung, h.	ORG
fumecheng-14015	370	11	kim	PERSON
fumecheng-14015	370	12	i.	PERSON
fumecheng-14015	370	13	kang	PERSON
fumecheng-14015	370	14	d.	NORP
fumecheng-14015	370	15	s.	PERSON
fumecheng-14015	370	16	kim	PERSON
fumecheng-14015	370	17	d.w.	GPE
fumecheng-14015	370	18	kang	PERSON
fumecheng-14015	370	19	2022	CARDINAL
fumecheng-14015	370	20	hcb	ORG
fumecheng-14015	371	1	2022	CARDINAL
fumecheng-14015	371	2	72nd	ORDINAL
fumecheng-14015	371	3	san diego	GPE
fumecheng-14015	371	4	usa	GPE
fumecheng-14015	371	5	1085-1089	CARDINAL
fumecheng-14015	372	1	4. light	CARDINAL
fumecheng-14015	372	2	d.	NORP
fumecheng-14015	372	3	faraci	GPE
fumecheng-14015	372	4	a.	PERSON
fumecheng-14015	372	5	fjelstad	GPE
fumecheng-14015	372	6	j., 1998	GPE
fumecheng-14015	372	7	41(5	CARDINAL
fumecheng-14015	373	1	280	CARDINAL
fumecheng-14015	374	1	940	CARDINAL
fumecheng-14015	374	2	c. chen	PERSON
fumecheng-14015	374	3	b. hwang 5	PERSON
fumecheng-14015	375	1	chen	PERSON
fumecheng-14015	375	2	k.n.	GPE
fumecheng-14015	375	3	tan	PERSON
fumecheng-14015	375	4	c.s.	GPE
fumecheng-14015	375	5	2011	DATE
fumecheng-14015	375	6	three	CARDINAL
fumecheng-14015	375	7	iet	NORP
fumecheng-14015	375	8	5(3	CARDINAL
fumecheng-14015	375	9	160-168	CARDINAL
fumecheng-14015	376	1	6	CARDINAL
fumecheng-14015	376	2	t., yang	GPE
fumecheng-14015	376	3	z.	PERSON
fumecheng-14015	376	4	chang, h.	ORG
fumecheng-14015	376	5	x.	GPE
fumecheng-14015	376	6	huang	PERSON
fumecheng-14015	376	7	z.	PERSON
fumecheng-14015	376	8	x.	GPE
fumecheng-14015	376	9	2021	DATE
fumecheng-14015	376	10	tdma	ORG
fumecheng-14015	376	11	3d	CARDINAL
fumecheng-14015	376	12	9(2	CARDINAL
fumecheng-14015	377	1	724-734	CARDINAL
fumecheng-14015	378	1	koester	PERSON
fumecheng-14015	378	2	s.	PERSON
fumecheng-14015	378	3	yu	GPE
fumecheng-14015	378	4	r.	NORP
fumecheng-14015	378	5	s.	PERSON
fumecheng-14015	378	6	chen	PERSON
fumecheng-14015	378	7	k.-n.	GPE
fumecheng-14015	378	8	d.	NORP
fumecheng-14015	378	9	narender	GPE
fumecheng-14015	378	10	r.	NORP
fumecheng-14015	378	11	l.	GPE
fumecheng-14015	378	12	m., sprogis	ORG
fumecheng-14015	378	13	e., 2008	PERSON
fumecheng-14015	378	14	3d	CARDINAL
fumecheng-14015	378	15	ibm	ORG
fumecheng-14015	379	1	583-597	CARDINAL
fumecheng-14015	380	1	peng	PERSON
fumecheng-14015	380	2	l.	PERSON
fumecheng-14015	380	3	li	PERSON
fumecheng-14015	380	4	lim	PERSON
fumecheng-14015	380	5	d.	NORP
fumecheng-14015	380	6	gao	PERSON
fumecheng-14015	380	7	s.	PERSON
fumecheng-14015	380	8	3-d	QUANTITY
fumecheng-14015	380	9	2500-2506	CARDINAL
fumecheng-14015	381	1	9	CARDINAL
fumecheng-14015	381	2	bae	ORG
fumecheng-14015	381	3	j.y.	GPE
fumecheng-14015	381	4	kim	PERSON
fumecheng-14015	381	5	lee	PERSON
fumecheng-14015	381	6	h.m.	GPE
fumecheng-14015	381	7	lee	PERSON
fumecheng-14015	381	8	s.g.	GPE
fumecheng-14015	381	9	lee	PERSON
fumecheng-14015	381	10	y.-w.	GPE
fumecheng-14015	381	11	moon	GPE
fumecheng-14015	381	12	j.t.	GPE
fumecheng-14015	381	13	hong	GPE
fumecheng-14015	381	14	w.s.	GPE
fumecheng-14015	381	15	2023	CARDINAL
fumecheng-14015	381	16	sn-ag-cu	ORG
fumecheng-14015	381	17	41(5	CARDINAL
fumecheng-14015	382	1	379-386	CARDINAL
fumecheng-14015	384	1	s.	PERSON
fumecheng-14015	384	2	kim	PERSON
fumecheng-14015	384	3	kim	PERSON
fumecheng-14015	384	4	kim	PERSON
fumecheng-14015	384	5	paik, k.-w.	ORG
fumecheng-14015	384	6	2014	DATE
fumecheng-14015	384	7	5(1	CARDINAL
fumecheng-14015	386	1	9	CARDINAL
fumecheng-14015	388	1	noguchi	GPE
fumecheng-14015	388	2	k.	PERSON
fumecheng-14015	388	3	ikeda	ORG
fumecheng-14015	388	4	m., shimizu, i.	PERSON
fumecheng-14015	388	5	kawamura	PERSON
fumecheng-14015	388	6	2001	DATE
fumecheng-14015	388	7	42(5	CARDINAL
fumecheng-14015	389	1	761-768	CARDINAL
fumecheng-14015	390	1	12	CARDINAL
fumecheng-14015	391	1	hua zhong	PERSON
fumecheng-14015	391	2	s.	PERSON
fumecheng-14015	391	3	1999	DATE
fumecheng-14015	392	1	44	CARDINAL
fumecheng-14015	394	1	kim	PERSON
fumecheng-14015	394	2	kim	PERSON
fumecheng-14015	394	3	jung	GPE
fumecheng-14015	394	4	2005	DATE
fumecheng-14015	394	5	11(2	CARDINAL
fumecheng-14015	395	1	121	CARDINAL
fumecheng-14015	396	1	14	CARDINAL
fumecheng-14015	397	1	lee	PERSON
fumecheng-14015	397	2	ma, h.	ORG
fumecheng-14015	397	3	liu	PERSON
fumecheng-14015	397	4	xue	ORG
fumecheng-14015	397	5	j.	PERSON
fumecheng-14015	397	6	2010	DATE
fumecheng-14015	397	7	sn-ag-cu	ORG
fumecheng-14015	397	8	39(10	CARDINAL
fumecheng-14015	398	1	2564-2573	DATE
fumecheng-14015	399	1	15	CARDINAL
fumecheng-14015	399	2	lee	PERSON
fumecheng-14015	399	3	c.-b.	GPE
fumecheng-14015	399	4	jung	GPE
fumecheng-14015	399	5	shur	ORG
fumecheng-14015	399	6	c.-c.	GPE
fumecheng-14015	399	7	2002	DATE
fumecheng-14015	400	1	1858-1863	DATE
fumecheng-14015	401	1	16	CARDINAL
fumecheng-14015	401	2	lee	PERSON
fumecheng-14015	401	3	zhou	PERSON
fumecheng-14015	401	4	b., blair	PERSON
fumecheng-14015	401	5	l., liu	PERSON
fumecheng-14015	401	6	t.r.	GPE
fumecheng-14015	401	7	2010	DATE
fumecheng-14015	401	8	sn-ag-cu	ORG
fumecheng-14015	401	9	39	DATE
fumecheng-14015	402	1	2588-2597	CARDINAL
fumecheng-14015	403	1	17	CARDINAL
fumecheng-14015	403	2	a.k.	GPE
fumecheng-14015	403	3	chan	GPE
fumecheng-14015	403	4	y.c.	GPE
fumecheng-14015	403	5	yung	GPE
fumecheng-14015	403	6	w.k.	GPE
fumecheng-14015	403	7	2009	DATE
fumecheng-14015	403	8	sn	ORG
fumecheng-14015	403	9	zn–3bi	ORG
fumecheng-14015	403	10	162(2	DATE
fumecheng-14015	404	1	92-98	CARDINAL
fumecheng-14015	405	1	18	CARDINAL
fumecheng-14015	406	1	tsukamoto, h.	ORG
fumecheng-14015	406	2	nishimura	GPE
fumecheng-14015	406	3	t.	GPE
fumecheng-14015	406	4	s.	GPE
fumecheng-14015	406	5	mcdonald, s.d.	ORG
fumecheng-14015	406	6	sweatman	GPE
fumecheng-14015	406	7	k.w.	GPE
fumecheng-14015	406	8	k., 2011	ORG
fumecheng-14015	406	9	51(3	CARDINAL
fumecheng-14015	407	1	657-667	CARDINAL
fumecheng-14015	409	1	liu	PERSON
fumecheng-14015	409	2	d.	NORP
fumecheng-14015	409	3	chen	PERSON
fumecheng-14015	409	4	liu	PERSON
fumecheng-14015	409	5	y.-w.	GPE
fumecheng-14015	409	6	hu	PERSON
fumecheng-14015	409	7	chen	PERSON
fumecheng-14015	409	8	k.-n.	GPE
fumecheng-14015	409	9	2021	DATE
fumecheng-14015	409	10	70°	QUANTITY
fumecheng-14015	409	11	1524-1527	DATE
fumecheng-14015	410	1	20	CARDINAL
fumecheng-14015	411	1	wang	ORG
fumecheng-14015	411	2	p.j.	GPE
fumecheng-14015	411	3	lee	PERSON
fumecheng-14015	411	4	c.c.	PERSON
fumecheng-14015	411	5	2009	DATE
fumecheng-14015	411	6	33(1	CARDINAL
fumecheng-14015	412	1	10-15	CARDINAL
fumecheng-14015	414	1	wang	ORG
fumecheng-14015	414	2	p.j.	GPE
fumecheng-14015	414	3	kim	PERSON
fumecheng-14015	414	4	j.s.	GPE
fumecheng-14015	414	5	lee	PERSON
fumecheng-14015	414	6	c.c.	PERSON
fumecheng-14015	414	7	2008	DATE
fumecheng-14015	414	8	045001	DATE
fumecheng-14015	415	1	22	DATE
fumecheng-14015	415	2	wu	PERSON
fumecheng-14015	415	3	j., lee	PERSON
fumecheng-14015	415	4	c.c.	PERSON
fumecheng-14015	415	5	2019	DATE
fumecheng-14015	416	1	2019	CARDINAL
fumecheng-14015	416	2	ieee 69th	ORG
fumecheng-14015	416	3	las vegas	GPE
fumecheng-14015	416	4	usa	GPE
fumecheng-14015	417	1	2302-2308	CARDINAL
fumecheng-14015	418	1	23	CARDINAL
fumecheng-14015	418	2	j.-p.	GPE
fumecheng-14015	418	3	cai	PERSON
fumecheng-14015	418	4	j.	PERSON
fumecheng-14015	418	5	wang	PERSON
fumecheng-14015	418	6	q.	PERSON
fumecheng-14015	418	7	zheng	PERSON
fumecheng-14015	418	8	k.	PERSON
fumecheng-14015	418	9	zhou	PERSON
fumecheng-14015	418	10	geng	PERSON
fumecheng-14015	418	11	2022	CARDINAL
fumecheng-14015	418	12	593	CARDINAL
fumecheng-14015	418	13	153436	DATE
fumecheng-14015	419	1	24	DATE
fumecheng-14015	419	2	wu	PERSON
fumecheng-14015	419	3	j., huo, y.	PERSON
fumecheng-14015	419	4	lee	PERSON
fumecheng-14015	419	5	c.c.	PERSON
fumecheng-14015	419	6	2018	DATE
fumecheng-14015	419	7	4	DATE
fumecheng-14015	420	1	417-422	CARDINAL
fumecheng-14015	422	1	karimi	PERSON
fumecheng-14015	422	2	m.	PERSON
fumecheng-14015	422	3	1995	DATE
fumecheng-14015	423	1	5364-5374	DATE
fumecheng-14015	424	1	26	CARDINAL
fumecheng-14015	424	2	sørensen	ORG
fumecheng-14015	424	3	m.r.	GPE
fumecheng-14015	424	4	mishin	PERSON
fumecheng-14015	424	5	a.f.	GPE
fumecheng-14015	424	6	2000	DATE
fumecheng-14015	424	7	62(6	CARDINAL
fumecheng-14015	425	1	3658-3673	DATE
fumecheng-14015	426	1	27	CARDINAL
fumecheng-14015	427	1	bai	ORG
fumecheng-14015	427	2	x.-m.	GPE
fumecheng-14015	427	3	vernon	ORG
fumecheng-14015	427	4	l.j.	GPE
fumecheng-14015	427	5	hoagland	ORG
fumecheng-14015	427	6	r.g.	GPE
fumecheng-14015	427	7	a.f.	GPE
fumecheng-14015	427	8	nastasi	GPE
fumecheng-14015	427	9	m.	PERSON
fumecheng-14015	427	10	uberuaga	GPE
fumecheng-14015	427	11	b.p.	GPE
fumecheng-14015	427	12	2012	DATE
fumecheng-14015	427	13	cu	GPE
fumecheng-14015	427	14	214103	DATE
fumecheng-14015	428	1	cu-cu	ORG
fumecheng-14015	428	2	3d	CARDINAL
fumecheng-14015	428	3	941 28	CARDINAL
fumecheng-14015	429	1	peng	PERSON
fumecheng-14015	429	2	l., lim	PERSON
fumecheng-14015	429	3	d.	NORP
fumecheng-14015	429	4	zhang, l.	ORG
fumecheng-14015	429	5	li	PERSON
fumecheng-14015	429	6	c.s.	GPE
fumecheng-14015	429	7	2012	DATE
fumecheng-14015	429	8	three	CARDINAL
fumecheng-14015	429	9	41	CARDINAL
fumecheng-14015	429	10	2567-2572	CARDINAL
fumecheng-14015	431	1	j.	PERSON
fumecheng-14015	431	2	ichiyanagi	NORP
fumecheng-14015	431	3	2014	DATE
fumecheng-14015	431	4	cu/cu	ORG
fumecheng-14015	431	5	134(9	CARDINAL
fumecheng-14015	431	6	284	CARDINAL
fumecheng-14015	431	7	30	CARDINAL
fumecheng-14015	432	1	takagi	ORG
fumecheng-14015	432	2	h.	PERSON
fumecheng-14015	432	3	maeda	ORG
fumecheng-14015	432	4	r.	NORP
fumecheng-14015	432	5	chung	GPE
fumecheng-14015	432	6	t.r.	GPE
fumecheng-14015	432	7	n.	PERSON
fumecheng-14015	432	8	suga	ORG
fumecheng-14015	432	9	t.	GPE
fumecheng-14015	432	10	1998	DATE
fumecheng-14015	432	11	japanese	NORP
fumecheng-14015	433	1	4197-4203	DATE
fumecheng-14015	434	1	31	CARDINAL
fumecheng-14015	434	2	gondcharton	PERSON
fumecheng-14015	434	3	imbert	GPE
fumecheng-14015	434	4	b.	PERSON
fumecheng-14015	434	5	m., 2015,	ORG
fumecheng-14015	434	6	2015	CARDINAL
fumecheng-14015	434	7	2015	CARDINAL
fumecheng-14015	434	8	grenoble	PERSON
fumecheng-14015	434	9	france	GPE
fumecheng-14015	435	1	229	CARDINAL
fumecheng-14015	436	1	32	CARDINAL
fumecheng-14015	437	1	ke	PERSON
fumecheng-14015	437	2	d., 2008	GPE
fumecheng-14015	437	3	thin cu	ORG
fumecheng-14015	437	4	103(11	DATE
fumecheng-14015	437	5	113705	DATE
fumecheng-14015	438	1	33	CARDINAL
fumecheng-14015	439	1	ke	PERSON
fumecheng-14015	439	2	zahid	PERSON
fumecheng-14015	439	3	f.	PERSON
fumecheng-14015	439	4	xia, k.	PERSON
fumecheng-14015	439	5	d.	NORP
fumecheng-14015	439	6	guo, h.	ORG
fumecheng-14015	439	7	2009	DATE
fumecheng-14015	439	8	thin cu	ORG
fumecheng-14015	439	9	155406	DATE
fumecheng-14015	440	1	34	CARDINAL
fumecheng-14015	441	1	shen	PERSON
fumecheng-14015	441	2	j., xie	PERSON
fumecheng-14015	441	3	j.	PERSON
fumecheng-14015	441	4	xiang	PERSON
fumecheng-14015	441	5	2018	DATE
fumecheng-14015	441	6	cu micro	ORG
fumecheng-14015	441	7	cu-cu joints	ORG
fumecheng-14015	441	8	257	CARDINAL
fumecheng-14015	442	1	250-256	CARDINAL
fumecheng-14015	442	2	35	CARDINAL
fumecheng-14015	443	1	chen	PERSON
fumecheng-14015	443	2	s.	PERSON
fumecheng-14015	443	3	f.	PERSON
fumecheng-14015	443	4	zhou	PERSON
fumecheng-14015	443	5	m.	PERSON
fumecheng-14015	443	6	bai	ORG
fumecheng-14015	443	7	2007	DATE
fumecheng-14015	443	8	al	GPE
fumecheng-14015	443	9	acta materialia	PERSON
fumecheng-14015	443	10	55(9	CARDINAL
fumecheng-14015	443	11	3169-3175	DATE
fumecheng-14015	444	1	36	DATE
fumecheng-14015	445	1	tian	PERSON
fumecheng-14015	445	2	gao	PERSON
fumecheng-14015	445	3	s.	PERSON
fumecheng-14015	445	4	zhao	PERSON
fumecheng-14015	445	5	l.	PERSON
fumecheng-14015	445	6	s.	PERSON
fumecheng-14015	445	7	pippan	GPE
fumecheng-14015	445	8	r.	NORP
fumecheng-14015	445	9	z.	PERSON
fumecheng-14015	445	10	2018	DATE
fumecheng-14015	445	11	scripta materialia	GPE
fumecheng-14015	445	12	142	CARDINAL
fumecheng-14015	446	1	88-91	CARDINAL
fumecheng-14015	447	1	37	CARDINAL
fumecheng-14015	448	1	tsukimoto	PERSON
fumecheng-14015	448	2	s.	GPE
fumecheng-14015	448	3	ito	GPE
fumecheng-14015	448	4	k., 2005	PERSON
fumecheng-14015	450	1	38	DATE
fumecheng-14015	451	1	jhan	GPE
fumecheng-14015	451	2	j.-j.	GPE
fumecheng-14015	451	3	k.	PERSON
fumecheng-14015	451	4	chen	PERSON
fumecheng-14015	451	5	c.-m	PERSON
fumecheng-14015	451	6	2022	CARDINAL
fumecheng-14015	451	7	nanocrystalline cu	ORG
fumecheng-14015	451	8	cu-cu	ORG
fumecheng-14015	451	9	the taiwan institute of chemical	ORG
fumecheng-14015	451	10	132	CARDINAL
fumecheng-14015	451	11	104127	DATE
fumecheng-14015	452	1	39	CARDINAL
fumecheng-14015	453	1	k.	PERSON
fumecheng-14015	453	2	2015	DATE
fumecheng-14015	453	3	118(13	DATE
fumecheng-14015	453	4	135301	DATE
fumecheng-14015	454	1	40	DATE
fumecheng-14015	455	1	nieh	ORG
fumecheng-14015	455	2	t.	GPE
fumecheng-14015	455	3	wadsworth	ORG
fumecheng-14015	455	4	1991	DATE
fumecheng-14015	455	5	hall-petch relation	ORG
fumecheng-14015	457	1	41	CARDINAL
fumecheng-14015	458	1	kao	PERSON
fumecheng-14015	458	2	li	PERSON
fumecheng-14015	458	3	shen	PERSON
fumecheng-14015	458	4	chen	PERSON
fumecheng-14015	458	5	c.-m	PERSON
fumecheng-14015	458	6	2023	CARDINAL
fumecheng-14015	458	7	13(1	CARDINAL
fumecheng-14015	458	8	428	CARDINAL
fumecheng-14015	458	9	42	CARDINAL
fumecheng-14015	459	1	watanabe, h.	ORG
fumecheng-14015	459	2	k.	PERSON
fumecheng-14015	459	3	2003	DATE
fumecheng-14015	459	4	44(4	CARDINAL
fumecheng-14015	460	1	496-503	CARDINAL
fumecheng-14015	461	1	43	CARDINAL
fumecheng-14015	462	1	kamiya	ORG
fumecheng-14015	462	2	s.	PERSON
fumecheng-14015	462	3	n., watanabe, s.	ORG
fumecheng-14015	462	4	sato, h.	ORG
fumecheng-14015	462	5	k.	PERSON
fumecheng-14015	462	6	m., nishida	ORG
fumecheng-14015	462	7	m., suzuki	ORG
fumecheng-14015	462	8	t.	GPE
fumecheng-14015	462	9	t.	GPE
fumecheng-14015	462	10	2013	DATE
fumecheng-14015	462	11	215	CARDINAL
fumecheng-14015	463	1	280	CARDINAL
fumecheng-14015	464	1	44	DATE
fumecheng-14015	464	2	m., tas, n.	PERSON
fumecheng-14015	464	3	j.g.	PERSON
fumecheng-14015	464	4	1999	DATE
fumecheng-14015	465	1	7448-7454	DATE
fumecheng-14015	466	1	45	CARDINAL
fumecheng-14015	466	2	budhe	ORG
fumecheng-14015	466	3	s.	GPE
fumecheng-14015	466	4	birajdar, n.	PERSON
fumecheng-14015	466	5	banea	PERSON
fumecheng-14015	466	6	m.	PERSON
fumecheng-14015	466	7	2015	DATE
fumecheng-14015	466	8	3	CARDINAL
fumecheng-14015	466	9	20	DATE
fumecheng-14015	466	10	46	DATE
fumecheng-14015	467	1	shigetou	ORG
fumecheng-14015	467	2	a.	PERSON
fumecheng-14015	467	3	t.	GPE
fumecheng-14015	467	4	suga	ORG
fumecheng-14015	467	5	t., 2005	GPE
fumecheng-14015	467	6	cmp-cu	ORG
fumecheng-14015	468	1	3149-3154	CARDINAL
fumecheng-14015	469	1	47	DATE
fumecheng-14015	469	2	fick, a.	ORG
fumecheng-14015	469	3	1855	DATE
fumecheng-14015	469	4	london	GPE
fumecheng-14015	469	5	edinburgh	GPE
fumecheng-14015	469	6	dublin philosophical magazine	ORG
fumecheng-14015	469	7	journal of science	ORG
fumecheng-14015	470	1	30	CARDINAL
fumecheng-14015	471	1	48	DATE
fumecheng-14015	472	1	jang	PERSON
fumecheng-14015	472	2	kim	PERSON
fumecheng-14015	472	3	kim	PERSON
fumecheng-14015	472	4	b.	PERSON
fumecheng-14015	472	5	t.	GPE
fumecheng-14015	472	6	y.-b.	GPE
fumecheng-14015	472	7	2011	DATE
fumecheng-14015	472	8	the cu-cu	ORG
fumecheng-14015	472	9	3d	CARDINAL
fumecheng-14015	472	10	17(1	CARDINAL
fumecheng-14015	473	1	105	CARDINAL
fumecheng-14015	473	2	49	DATE
fumecheng-14015	474	1	jang	PERSON
fumecheng-14015	474	2	s.	PERSON
fumecheng-14015	474	3	kim	PERSON
fumecheng-14015	474	4	b.-o.	GPE
fumecheng-14015	474	5	matthias	PERSON
fumecheng-14015	474	6	t.	GPE
fumecheng-14015	474	7	hyun	PERSON
fumecheng-14015	474	8	lee	PERSON
fumecheng-14015	474	9	h.-j.	GPE
fumecheng-14015	474	10	y.-b.	GPE
fumecheng-14015	474	11	2008	DATE
fumecheng-14015	474	12	cu-cu	ORG
fumecheng-14015	474	13	3-d	QUANTITY
fumecheng-14015	474	14	korean	NORP
fumecheng-14015	474	15	18(4	CARDINAL
fumecheng-14015	475	1	204	CARDINAL
fumecheng-14015	476	1	50	CARDINAL
fumecheng-14015	477	1	chiang	PERSON
fumecheng-14015	477	2	liang	PERSON
fumecheng-14015	477	3	j.-m.	GPE
fumecheng-14015	477	4	huang	PERSON
fumecheng-14015	477	5	chiu	PERSON
fumecheng-14015	477	6	2017	DATE
fumecheng-14015	477	7	japanese	NORP
fumecheng-14015	477	8	56(3	CARDINAL
fumecheng-14015	477	9	035503	DATE
fumecheng-14015	478	1	51	DATE
fumecheng-14015	479	1	lin	PERSON
fumecheng-14015	479	2	tran	PERSON
fumecheng-14015	479	3	d.-p.	GPE
fumecheng-14015	479	4	liu	PERSON
fumecheng-14015	479	5	li	PERSON
fumecheng-14015	479	6	chen	PERSON
fumecheng-14015	479	7	2022	CARDINAL
fumecheng-14015	479	8	nanotwinned cu	ORG
fumecheng-14015	479	9	15(3	CARDINAL
fumecheng-14015	479	10	937	CARDINAL
fumecheng-14015	481	1	li	PERSON
fumecheng-14015	481	2	j., cheng	PERSON
fumecheng-14015	481	3	c.	PERSON
fumecheng-14015	481	4	j.	PERSON
fumecheng-14015	481	5	x.	GPE
fumecheng-14015	481	6	cheng	GPE
fumecheng-14015	481	7	s.	PERSON
fumecheng-14015	481	8	liao	PERSON
fumecheng-14015	481	9	z.	PERSON
fumecheng-14015	481	10	2016	DATE
fumecheng-14015	481	11	cu-cu	ORG
fumecheng-14015	481	12	cu nanosolder	ORG
fumecheng-14015	481	13	184(5	CARDINAL
fumecheng-14015	482	1	193	CARDINAL
fumecheng-14015	483	1	53	CARDINAL
fumecheng-14015	483	2	c., yang	GPE
fumecheng-14015	483	3	1996	DATE
fumecheng-14015	484	1	57(1	CARDINAL
fumecheng-14015	485	1	129-140	CARDINAL
fumecheng-14015	486	1	54	DATE
fumecheng-14015	487	1	kim	PERSON
fumecheng-14015	487	2	h.	PERSON
fumecheng-14015	487	3	kim	PERSON
fumecheng-14015	487	4	j., kim	PERSON
fumecheng-14015	487	5	jo	PERSON
fumecheng-14015	487	6	c., kim	PERSON
fumecheng-14015	487	7	2022	CARDINAL
fumecheng-14015	488	1	2022	CARDINAL
fumecheng-14015	488	2	72nd	ORDINAL
fumecheng-14015	488	3	san diego	GPE
fumecheng-14015	488	4	usa	GPE
fumecheng-14015	489	1	194-197	CARDINAL
fumecheng-14015	490	1	942	CARDINAL
fumecheng-14015	490	2	s. choi	PERSON
fumecheng-14015	490	3	c. chen	PERSON
fumecheng-14015	490	4	b. hwang 55	PERSON
fumecheng-14015	491	1	m., danas	PERSON
fumecheng-14015	491	2	besson	PERSON
fumecheng-14015	491	3	2015	DATE
fumecheng-14015	491	4	63(3	CARDINAL
fumecheng-14015	492	1	240-263	CARDINAL
fumecheng-14015	494	1	li	PERSON
fumecheng-14015	494	2	li	PERSON
fumecheng-14015	494	3	m.	PERSON
fumecheng-14015	494	4	2016	DATE
fumecheng-14015	495	1	259	CARDINAL
fumecheng-14015	496	1	57	CARDINAL
fumecheng-14015	497	1	lee	PERSON
fumecheng-14015	497	2	h.-d.	GPE
fumecheng-14015	497	3	lee	PERSON
fumecheng-14015	498	1	w.-s.	GPE
fumecheng-14015	498	2	haag, a.	PERSON
fumecheng-14015	498	3	watanabe, s., arnold	ORG
fumecheng-14015	498	4	m., lee, h.-j.	PERSON
fumecheng-14015	498	5	2024	DATE
fumecheng-14015	498	6	cu-cu	ORG
fumecheng-14015	498	7	180	CARDINAL
fumecheng-14015	498	8	104073	DATE
fumecheng-14015	499	1	58	DATE
fumecheng-14015	500	1	gao	PERSON
fumecheng-14015	500	2	x.	GPE
fumecheng-14015	500	3	wang	PERSON
fumecheng-14015	500	4	t.	GPE
fumecheng-14015	500	5	kim	PERSON
fumecheng-14015	500	6	j., 2005	GPE
fumecheng-14015	500	7	42(18-19	CARDINAL
fumecheng-14015	501	1	5097-5117	DATE
fumecheng-14015	502	1	59	CARDINAL
fumecheng-14015	502	2	pardoen	PERSON
fumecheng-14015	502	3	t.	GPE
fumecheng-14015	502	4	hutchinson	GPE
fumecheng-14015	502	5	j., 2003	GPE
fumecheng-14015	502	6	acta materialia	GPE
fumecheng-14015	502	7	51(1	CARDINAL
fumecheng-14015	503	1	133	CARDINAL
fumecheng-14015	504	1	60	CARDINAL
fumecheng-14015	505	1	kim	PERSON
fumecheng-14015	505	2	t.	GPE
fumecheng-14015	505	3	t.	GPE
fumecheng-14015	505	4	suga	ORG
fumecheng-14015	505	5	t.	GPE
fumecheng-14015	505	6	2003	DATE
fumecheng-14015	505	7	cu-cu	ORG
fumecheng-14015	505	8	21(2	CARDINAL
fumecheng-14015	506	1	449-453	CARDINAL
fumecheng-14015	507	1	61	CARDINAL
fumecheng-14015	508	1	shigetou	ORG
fumecheng-14015	508	2	a.	PERSON
fumecheng-14015	508	3	t.	GPE
fumecheng-14015	508	4	suga	ORG
fumecheng-14015	508	5	t.	GPE
fumecheng-14015	508	6	2006	DATE
fumecheng-14015	508	7	japan	GPE
fumecheng-14015	509	1	34	CARDINAL
fumecheng-14015	510	1	62	CARDINAL
fumecheng-14015	510	2	taniyama, s.	PERSON
fumecheng-14015	510	3	wang, y.-h.	PERSON
fumecheng-14015	510	4	fujino	ORG
fumecheng-14015	510	5	suga	PERSON
fumecheng-14015	510	6	t., 2008	GPE
fumecheng-14015	510	7	2008	DATE
fumecheng-14015	511	1	9th	ORDINAL
fumecheng-14015	511	2	japan	GPE
fumecheng-14015	511	3	tokyo	GPE
fumecheng-14015	511	4	japan	GPE
fumecheng-14015	512	1	141	CARDINAL
fumecheng-14015	514	1	liu	PERSON
fumecheng-14015	514	2	h.c.	GPE
fumecheng-14015	514	3	gusak, a.m.	PERSON
fumecheng-14015	514	4	tu	PERSON
fumecheng-14015	514	5	k.n.	GPE
fumecheng-14015	514	6	chen	PERSON
fumecheng-14015	514	7	2021	DATE
fumecheng-14015	514	8	cu	GPE
fumecheng-14015	514	9	181	CARDINAL
fumecheng-14015	514	10	111459	DATE
fumecheng-14015	515	1	64	DATE
fumecheng-14015	516	1	wang	PERSON
fumecheng-14015	516	2	huang	PERSON
fumecheng-14015	516	3	y.t.	GPE
fumecheng-14015	516	4	liu	PERSON
fumecheng-14015	516	5	y.x.	GPE
fumecheng-14015	516	6	feng, s.p.	ORG
fumecheng-14015	516	7	huang	PERSON
fumecheng-14015	516	8	m.x.	GPE
fumecheng-14015	516	9	2022	CARDINAL
fumecheng-14015	516	10	nanocrystalline cu	ORG
fumecheng-14015	516	11	cu-cu	ORG
fumecheng-14015	516	12	220	CARDINAL
fumecheng-14015	517	1	65	CARDINAL
fumecheng-14015	518	1	shigetou	ORG
fumecheng-14015	518	2	a.	PERSON
fumecheng-14015	518	3	suga	PERSON
fumecheng-14015	518	4	t., 2008	GPE
fumecheng-14015	518	5	6-µm	CARDINAL
fumecheng-14015	518	6	31(3	CARDINAL
fumecheng-14015	519	1	473-478	CARDINAL
fumecheng-14015	520	1	66	CARDINAL
fumecheng-14015	521	1	wang, y.-h.	PERSON
fumecheng-14015	521	2	suga	ORG
fumecheng-14015	521	3	t., 2008	GPE
fumecheng-14015	521	4	2008	DATE
fumecheng-14015	521	5	58th	TIME
fumecheng-14015	521	6	buena vista	ORG
fumecheng-14015	521	7	usa	GPE
fumecheng-14015	522	1	944-949	CARDINAL
fumecheng-14015	523	1	67	CARDINAL
fumecheng-14015	523	2	barr	PERSON
fumecheng-14015	523	3	t.	GPE
fumecheng-14015	523	4	1977	DATE
fumecheng-14015	523	5	esca	ORG
fumecheng-14015	524	1	660-665	CARDINAL
fumecheng-14015	525	1	68	CARDINAL
fumecheng-14015	526	1	iijima	PERSON
fumecheng-14015	526	2	j., lim	PERSON
fumecheng-14015	526	3	hong	GPE
fumecheng-14015	526	4	suzuki	ORG
fumecheng-14015	526	5	s.	GPE
fumecheng-14015	526	6	mimura	PERSON
fumecheng-14015	526	7	k.	PERSON
fumecheng-14015	526	8	isshiki	ORG
fumecheng-14015	526	9	m., 2006	PERSON
fumecheng-14015	526	10	253(5	PERSON
fumecheng-14015	526	11	2825-2829	TIME
fumecheng-14015	528	1	i.	PERSON
fumecheng-14015	528	2	r.	NORP
fumecheng-14015	528	3	haick, h.	ORG
fumecheng-14015	528	4	tannenbaum	PERSON
fumecheng-14015	528	5	r.	NORP
fumecheng-14015	528	6	2008	DATE
fumecheng-14015	528	7	112(4	CARDINAL
fumecheng-14015	529	1	1101	CARDINAL
fumecheng-14015	530	1	70	DATE
fumecheng-14015	531	1	li	PERSON
fumecheng-14015	531	2	j.	PERSON
fumecheng-14015	531	3	g.	PERSON
fumecheng-14015	531	4	mayer	PERSON
fumecheng-14015	531	5	j., tu	PERSON
fumecheng-14015	531	6	k.-n	GPE
fumecheng-14015	531	7	1991	DATE
fumecheng-14015	531	8	69(2	CARDINAL
fumecheng-14015	531	9	1020-1029	CARDINAL
fumecheng-14015	532	1	71	CARDINAL
fumecheng-14015	532	2	badillo-avila	PERSON
fumecheng-14015	532	3	castanedo-perez	PERSON
fumecheng-14015	532	4	r.	NORP
fumecheng-14015	532	5	j., guzman-caballero	ORG
fumecheng-14015	532	6	d.	NORP
fumecheng-14015	532	7	torres-delgado	PERSON
fumecheng-14015	532	8	2019	DATE
fumecheng-14015	532	9	cu2o	GPE
fumecheng-14015	532	10	236	CARDINAL
fumecheng-14015	532	11	121759	DATE
fumecheng-14015	533	1	72	DATE
fumecheng-14015	534	1	t.	GPE
fumecheng-14015	534	2	s.	PERSON
fumecheng-14015	534	3	kawano	PERSON
fumecheng-14015	534	4	m., 2014	ORG
fumecheng-14015	534	5	cu-cu	ORG
fumecheng-14015	534	6	three	CARDINAL
fumecheng-14015	535	1	2014	DATE
fumecheng-14015	535	2	toyama	GPE
fumecheng-14015	535	3	japan	GPE
fumecheng-14015	536	1	475-479	CARDINAL
fumecheng-14015	538	1	kang	PERSON
fumecheng-14015	538	2	lee	PERSON
fumecheng-14015	538	3	kim	PERSON
fumecheng-14015	538	4	lim	PERSON
fumecheng-14015	538	5	kim	PERSON
fumecheng-14015	538	6	kim	PERSON
fumecheng-14015	538	7	kim	PERSON
fumecheng-14015	538	8	2012	DATE
fumecheng-14015	539	1	29-33	DATE
fumecheng-14015	540	1	74	DATE
fumecheng-14015	541	1	chen	PERSON
fumecheng-14015	541	2	k.-n.	GPE
fumecheng-14015	541	3	a.	PERSON
fumecheng-14015	541	4	reif	GPE
fumecheng-14015	541	5	r., 2005	GPE
fumecheng-14015	541	6	three	CARDINAL
fumecheng-14015	541	7	1464-1467	CARDINAL
fumecheng-14015	542	1	75	CARDINAL
fumecheng-14015	543	1	chen	PERSON
fumecheng-14015	543	2	k.-n.	GPE
fumecheng-14015	543	3	a.	PERSON
fumecheng-14015	543	4	r.	NORP
fumecheng-14015	543	5	2006	DATE
fumecheng-14015	544	1	230	CARDINAL
fumecheng-14015	545	1	76	DATE
fumecheng-14015	546	1	cui	PERSON
fumecheng-14015	546	2	wang	PERSON
fumecheng-14015	546	3	f.	PERSON
fumecheng-14015	546	4	ding, h.	PERSON
fumecheng-14015	546	5	2020	DATE
fumecheng-14015	546	6	13(7	CARDINAL
fumecheng-14015	546	7	1784	DATE
fumecheng-14015	547	1	77	DATE
fumecheng-14015	548	1	s.	GPE
fumecheng-14015	548	2	bajwa	GPE
fumecheng-14015	548	3	a.a.	GPE
fumecheng-14015	548	4	colosimo	GPE
fumecheng-14015	548	5	t.	GPE
fumecheng-14015	548	6	s.	PERSON
fumecheng-14015	548	7	2019	DATE
fumecheng-14015	548	8	cu-cu	ORG
fumecheng-14015	549	1	2019	CARDINAL
fumecheng-14015	549	2	ieee 69th	ORG
fumecheng-14015	549	3	las vegas	GPE
fumecheng-14015	549	4	usa	GPE
fumecheng-14015	550	1	620-627	CARDINAL
fumecheng-14015	552	1	yang	PERSON
fumecheng-14015	552	2	w.	PERSON
fumecheng-14015	552	3	zhou	PERSON
fumecheng-14015	552	4	c., zhang	PERSON
fumecheng-14015	552	5	j.	PERSON
fumecheng-14015	552	6	suga	ORG
fumecheng-14015	552	7	t.	GPE
fumecheng-14015	552	8	2017	DATE
fumecheng-14015	552	9	165(4	CARDINAL
fumecheng-14015	552	10	79	DATE
fumecheng-14015	553	1	huffman	PERSON
fumecheng-14015	553	2	lannon	PERSON
fumecheng-14015	553	3	j.	PERSON
fumecheng-14015	553	4	m., gregory	PERSON
fumecheng-14015	553	5	d.	NORP
fumecheng-14015	553	6	2009	DATE
fumecheng-14015	553	7	3-d	QUANTITY
fumecheng-14015	553	8	4(03	CARDINAL
fumecheng-14015	554	1	jang	PERSON
fumecheng-14015	554	2	hyun	PERSON
fumecheng-14015	554	3	s.	PERSON
fumecheng-14015	554	4	lee	GPE
fumecheng-14015	554	5	h.-j.	GPE
fumecheng-14015	554	6	y.-b.	GPE
fumecheng-14015	554	7	2009	DATE
fumecheng-14015	554	8	cu-cu thermocompression	ORG
fumecheng-14015	554	9	3d	CARDINAL
fumecheng-14015	554	10	38(7	CARDINAL
fumecheng-14015	554	11	2449-2454	CARDINAL
fumecheng-14015	555	1	cu-cu	ORG
fumecheng-14015	555	2	3d	CARDINAL
fumecheng-14015	555	3	943 81	CARDINAL
fumecheng-14015	556	1	swinnen	PERSON
fumecheng-14015	556	2	b.	PERSON
fumecheng-14015	556	3	w., de moor	PERSON
fumecheng-14015	556	4	carbonell	PERSON
fumecheng-14015	556	5	l., de munck	PERSON
fumecheng-14015	556	6	k.	PERSON
fumecheng-14015	556	7	b.	PERSON
fumecheng-14015	556	8	s.	PERSON
fumecheng-14015	556	9	tezcan	NORP
fumecheng-14015	556	10	d.s.	GPE
fumecheng-14015	556	11	z., 2006	PERSON
fumecheng-14015	556	12	3d	CARDINAL
fumecheng-14015	556	13	cu-cu	ORG
fumecheng-14015	556	14	10	CARDINAL
fumecheng-14015	557	1	2006	DATE
fumecheng-14015	557	2	san francisco	GPE
fumecheng-14015	557	3	usa	GPE
fumecheng-14015	558	1	71-74	DATE
fumecheng-14015	560	1	wang	PERSON
fumecheng-14015	560	2	suga	ORG
fumecheng-14015	560	3	t.	GPE
fumecheng-14015	560	4	2010	DATE
fumecheng-14015	561	1	2010	DATE
fumecheng-14015	561	2	60th	ORDINAL
fumecheng-14015	561	3	las vegas	GPE
fumecheng-14015	561	4	usa	GPE
fumecheng-14015	561	5	303	CARDINAL
fumecheng-14015	561	6	suga	ORG
fumecheng-14015	561	7	t.	GPE
fumecheng-14015	561	8	2006	DATE
fumecheng-14015	561	9	cu-cu	ORG
fumecheng-14015	561	10	ecs	ORG
fumecheng-14015	561	11	3(6	CARDINAL
fumecheng-14015	562	1	155	CARDINAL
fumecheng-14015	563	1	84	CARDINAL
fumecheng-14015	564	1	hong	GPE
fumecheng-14015	564	2	z.-j	GPE
fumecheng-14015	564	3	liu	PERSON
fumecheng-14015	564	4	d.	NORP
fumecheng-14015	564	5	hu	PERSON
fumecheng-14015	564	6	weng	PERSON
fumecheng-14015	564	7	liu	PERSON
fumecheng-14015	564	8	chen	PERSON
fumecheng-14015	564	9	k.-n.	GPE
fumecheng-14015	564	10	2022	CARDINAL
fumecheng-14015	564	11	cu-cu	ORG
fumecheng-14015	564	12	592	CARDINAL
fumecheng-14015	564	13	153243	DATE
fumecheng-14015	565	1	85	DATE
fumecheng-14015	566	1	tan	PERSON
fumecheng-14015	566	2	c.s.	GPE
fumecheng-14015	566	3	lim	PERSON
fumecheng-14015	566	4	d.f.	GPE
fumecheng-14015	566	5	singh	GPE
fumecheng-14015	566	6	s.g.	GPE
fumecheng-14015	566	7	goulet	GPE
fumecheng-14015	566	8	s.	PERSON
fumecheng-14015	566	9	bergkvist	GPE
fumecheng-14015	566	10	m., 2009	PERSON
fumecheng-14015	566	11	cu-cu	ORG
fumecheng-14015	566	12	95(19	CARDINAL
fumecheng-14015	566	13	192108	DATE
fumecheng-14015	568	1	chou	PERSON
fumecheng-14015	568	2	huang	PERSON
fumecheng-14015	568	3	chen	PERSON
fumecheng-14015	568	4	hu	PERSON
fumecheng-14015	568	5	liu	PERSON
fumecheng-14015	568	6	d.	NORP
fumecheng-14015	568	7	chang	PERSON
fumecheng-14015	569	1	chen	PERSON
fumecheng-14015	569	2	lin	PERSON
fumecheng-14015	569	3	chang	PERSON
fumecheng-14015	569	4	2020	DATE
fumecheng-14015	569	5	3-d	QUANTITY
fumecheng-14015	570	1	36	CARDINAL
fumecheng-14015	571	1	87	DATE
fumecheng-14015	572	1	panigrahi	GPE
fumecheng-14015	572	2	a.k.	GPE
fumecheng-14015	572	3	bonam	GPE
fumecheng-14015	572	4	t.	GPE
fumecheng-14015	572	5	singh	GPE
fumecheng-14015	572	6	s.g.	GPE
fumecheng-14015	572	7	2016	DATE
fumecheng-14015	572	8	cu-cu	ORG
fumecheng-14015	572	9	169(1	CARDINAL
fumecheng-14015	573	1	269-272	CARDINAL
fumecheng-14015	575	1	lykova	ORG
fumecheng-14015	575	2	m.	PERSON
fumecheng-14015	575	3	panchenko	PERSON
fumecheng-14015	575	4	i.	PERSON
fumecheng-14015	575	5	j., geidel	PERSON
fumecheng-14015	575	6	m., wolf	PERSON
fumecheng-14015	575	7	m.j.	GPE
fumecheng-14015	575	8	lang	PERSON
fumecheng-14015	575	9	k.-d	GPE
fumecheng-14015	575	10	2018	DATE
fumecheng-14015	575	11	cu/cu	ORG
fumecheng-14015	577	1	106	CARDINAL
fumecheng-14015	578	1	tsai	PERSON
fumecheng-14015	578	2	hu	PERSON
fumecheng-14015	578	3	chen	PERSON
fumecheng-14015	578	4	k.-n.	GPE
fumecheng-14015	578	5	2020	DATE
fumecheng-14015	578	6	41(8	DATE
fumecheng-14015	578	7	1229-1232	CARDINAL
fumecheng-14015	579	1	90	CARDINAL
fumecheng-14015	579	2	huang	PERSON
fumecheng-14015	579	3	w.-l.	GPE
fumecheng-14015	579	4	kao	PERSON
fumecheng-14015	579	5	lin	PERSON
fumecheng-14015	579	6	kao	ORG
fumecheng-14015	579	7	c.r.	GPE
fumecheng-14015	579	8	2022	CARDINAL
fumecheng-14015	579	9	sn	ORG
fumecheng-14015	579	10	3d	CARDINAL
fumecheng-14015	579	11	15(21	CARDINAL
fumecheng-14015	579	12	7783	DATE
fumecheng-14015	580	1	91	CARDINAL
fumecheng-14015	581	1	lee	PERSON
fumecheng-14015	581	2	s.	GPE
fumecheng-14015	581	3	park	GPE
fumecheng-14015	581	4	s.	GPE
fumecheng-14015	581	5	kim	PERSON
fumecheng-14015	581	6	s.e.	GPE
fumecheng-14015	581	7	2023	CARDINAL
fumecheng-14015	581	8	14(1	CARDINAL
fumecheng-14015	581	9	147	CARDINAL
fumecheng-14015	582	1	liu	PERSON
fumecheng-14015	582	2	d.	NORP
fumecheng-14015	582	3	chen	PERSON
fumecheng-14015	582	4	tsai	PERSON
fumecheng-14015	582	5	chen	PERSON
fumecheng-14015	582	6	k.-n	GPE
fumecheng-14015	582	7	2019	DATE
fumecheng-14015	582	8	150 °	QUANTITY
fumecheng-14015	583	1	2019	CARDINAL
fumecheng-14015	583	2	3d	CARDINAL
fumecheng-14015	583	3	sendai	GPE
fumecheng-14015	583	4	japan	GPE
fumecheng-14015	583	5	9058873	DATE
fumecheng-14015	585	1	liu	PERSON
fumecheng-14015	585	2	d.	NORP
fumecheng-14015	585	3	chen	PERSON
fumecheng-14015	585	4	chen	PERSON
fumecheng-14015	585	5	k.-n.	GPE
fumecheng-14015	585	6	2020	DATE
fumecheng-14015	585	7	cu-cu	ORG
fumecheng-14015	585	8	2020	DATE
fumecheng-14015	585	9	70th	ORDINAL
fumecheng-14015	585	10	orlando, usa	GPE
fumecheng-14015	585	11	1322-1327	CARDINAL
fumecheng-14015	587	1	l.	GPE
fumecheng-14015	587	2	chen	PERSON
fumecheng-14015	587	3	x.	GPE
fumecheng-14015	587	4	qian	PERSON
fumecheng-14015	587	5	l.	PERSON
fumecheng-14015	587	6	2004	DATE
fumecheng-14015	587	7	304(5669	CARDINAL
fumecheng-14015	588	1	422-426	CARDINAL
fumecheng-14015	589	1	95	CARDINAL
fumecheng-14015	590	1	juang	PERSON
fumecheng-14015	590	2	j.-y.	GPE
fumecheng-14015	590	3	chen	PERSON
fumecheng-14015	590	4	k.-j	PERSON
fumecheng-14015	590	5	chen	PERSON
fumecheng-14015	590	6	hsu	PERSON
fumecheng-14015	590	7	chen	PERSON
fumecheng-14015	590	8	2018	DATE
fumecheng-14015	590	9	8, 13910	DATE
fumecheng-14015	592	1	liu	PERSON
fumecheng-14015	592	2	c.-m	PERSON
fumecheng-14015	592	3	lin	PERSON
fumecheng-14015	593	1	chen	PERSON
fumecheng-14015	593	2	2014	DATE
fumecheng-14015	593	3	nanotwinned cu	ORG
fumecheng-14015	593	4	4	CARDINAL
fumecheng-14015	593	5	6123	DATE
fumecheng-14015	595	1	li	PERSON
fumecheng-14015	595	2	k.-n	GPE
fumecheng-14015	595	3	chen	PERSON
fumecheng-14015	595	4	2020	DATE
fumecheng-14015	595	5	111>-oriented	CARDINAL
fumecheng-14015	595	6	nanotwinned cu	ORG
fumecheng-14015	595	7	13(6	CARDINAL
fumecheng-14015	595	8	1310	DATE
fumecheng-14015	596	1	98	CARDINAL
fumecheng-14015	597	1	tseng	PERSON
fumecheng-14015	597	2	liu	PERSON
fumecheng-14015	597	3	m.-h.	GPE
fumecheng-14015	597	4	ong	GPE
fumecheng-14015	597	5	j.-j.	GPE
fumecheng-14015	597	6	tran	PERSON
fumecheng-14015	597	7	d.-p.	GPE
fumecheng-14015	597	8	chen	PERSON
fumecheng-14015	597	9	2023	CARDINAL
fumecheng-14015	597	10	111	CARDINAL
fumecheng-14015	597	11	111	CARDINAL
fumecheng-14015	597	12	nanotwinned cu	ORG
fumecheng-14015	597	13	cu-cu	ORG
fumecheng-14015	597	14	23(8	CARDINAL
fumecheng-14015	598	1	5519-5527	DATE
fumecheng-14015	599	1	99	CARDINAL
fumecheng-14015	600	1	tseng	PERSON
fumecheng-14015	600	2	tseng	PERSON
fumecheng-14015	600	3	huang	PERSON
fumecheng-14015	600	4	y.-p.	GPE
fumecheng-14015	600	5	hsu, y.-t.	PERSON
fumecheng-14015	600	6	leu	PERSON
fumecheng-14015	600	7	j., tu	PERSON
fumecheng-14015	600	8	k.-n	GPE
fumecheng-14015	600	9	chen	PERSON
fumecheng-14015	600	10	2020	DATE
fumecheng-14015	600	11	111)-preferred	CARDINAL
fumecheng-14015	600	12	168	CARDINAL
fumecheng-14015	600	13	110545	DATE
fumecheng-14015	601	1	100	CARDINAL
fumecheng-14015	602	1	zhao	PERSON
fumecheng-14015	602	2	x.	GPE
fumecheng-14015	602	3	a.k.	GPE
fumecheng-14015	602	4	pei	ORG
fumecheng-14015	602	5	cheng	PERSON
fumecheng-14015	602	6	k.	PERSON
fumecheng-14015	602	7	huang	PERSON
fumecheng-14015	602	8	m.	PERSON
fumecheng-14015	602	9	2016	DATE
fumecheng-14015	602	10	111	CARDINAL
fumecheng-14015	602	11	676	CARDINAL
fumecheng-14015	603	1	474-486	CARDINAL
fumecheng-14015	605	1	liu	PERSON
fumecheng-14015	605	2	c.-m	PERSON
fumecheng-14015	605	3	lin	PERSON
fumecheng-14015	605	4	huang	PERSON
fumecheng-14015	605	5	chu	PERSON
fumecheng-14015	605	6	chen	PERSON
fumecheng-14015	605	7	chen	PERSON
fumecheng-14015	605	8	k.-n	GPE
fumecheng-14015	605	9	k.-n	GPE
fumecheng-14015	605	10	2015	DATE
fumecheng-14015	605	11	111	CARDINAL
fumecheng-14015	605	12	nanotwinned cu	ORG
fumecheng-14015	605	13	5	CARDINAL
fumecheng-14015	605	14	9734	DATE
fumecheng-14015	606	1	102	CARDINAL
fumecheng-14015	606	2	k.c.	GPE
fumecheng-14015	606	3	juang	PERSON
fumecheng-14015	606	4	j.-y.	GPE
fumecheng-14015	606	5	chen	PERSON
fumecheng-14015	606	6	2019	DATE
fumecheng-14015	606	7	nanotwinned cu bumps	ORG
fumecheng-14015	606	8	japanese	NORP
fumecheng-14015	606	9	59(5	DATE
fumecheng-14015	607	1	53-58	CARDINAL
fumecheng-14015	608	1	103	CARDINAL
fumecheng-14015	609	1	t.	GPE
fumecheng-14015	609	2	wang	ORG
fumecheng-14015	609	3	cheng	PERSON
fumecheng-14015	609	4	wu	PERSON
fumecheng-14015	609	5	s.	PERSON
fumecheng-14015	609	6	2024	DATE
fumecheng-14015	609	7	14(9	CARDINAL
fumecheng-14015	609	8	771	CARDINAL