id	sid	eid	entity	type
fumecheng-1521	2	1	14	CARDINAL
fumecheng-1521	2	2	2016	DATE
fumecheng-1521	3	1	55 61	CARDINAL
fumecheng-1521	3	2	539.3	CARDINAL
fumecheng-1521	3	3	qiang li	PERSON
fumecheng-1521	3	4	berlin institute of technology	ORG
fumecheng-1521	3	5	germany	GPE
fumecheng-1521	6	1	two	CARDINAL
fumecheng-1521	8	1	1	CARDINAL
fumecheng-1521	9	1	1	CARDINAL
fumecheng-1521	11	1	2	CARDINAL
fumecheng-1521	12	1	5	CARDINAL
fumecheng-1521	13	1	the last few decades	DATE
fumecheng-1521	13	2	6	CARDINAL
fumecheng-1521	14	1	8	CARDINAL
fumecheng-1521	16	1	9-11	CARDINAL
fumecheng-1521	17	1	january 4	DATE
fumecheng-1521	17	2	2016	DATE
fumecheng-1521	17	3	march 1	DATE
fumecheng-1521	17	4	2016	DATE
fumecheng-1521	17	5	qiang li	PERSON
fumecheng-1521	17	6	university of berlin	ORG
fumecheng-1521	17	7	10623	DATE
fumecheng-1521	17	8	berlin	GPE
fumecheng-1521	17	9	germany e	GPE
fumecheng-1521	17	10	56	CARDINAL
fumecheng-1521	17	11	q. li	PERSON
fumecheng-1521	18	1	9	CARDINAL
fumecheng-1521	19	1	10	CARDINAL
fumecheng-1521	19	2	9	CARDINAL
fumecheng-1521	21	1	12	CARDINAL
fumecheng-1521	22	1	13	CARDINAL
fumecheng-1521	22	2	14	CARDINAL
fumecheng-1521	22	3	13	CARDINAL
fumecheng-1521	22	4	14	CARDINAL
fumecheng-1521	23	1	15	CARDINAL
fumecheng-1521	26	1	2.	CARDINAL
fumecheng-1521	26	2	9	CARDINAL
fumecheng-1521	26	3	9	CARDINAL
fumecheng-1521	28	1	half	CARDINAL
fumecheng-1521	29	1	fig	ORG
fumecheng-1521	30	1	1	CARDINAL
fumecheng-1521	30	2	   	DATE
fumecheng-1521	30	3	1	CARDINAL
fumecheng-1521	31	1	16	CARDINAL
fumecheng-1521	31	2	17	CARDINAL
fumecheng-1521	32	1	57	CARDINAL
fumecheng-1521	32	2	zero	CARDINAL
fumecheng-1521	32	3	two	CARDINAL
fumecheng-1521	33	1	9	CARDINAL
fumecheng-1521	34	1	0x	CARDINAL
fumecheng-1521	34	2	2	CARDINAL
fumecheng-1521	35	1	zero	CARDINAL
fumecheng-1521	37	1	3	CARDINAL
fumecheng-1521	37	2	9	CARDINAL
fumecheng-1521	38	1	three	CARDINAL
fumecheng-1521	38	2	one	CARDINAL
fumecheng-1521	39	1	18-21	CARDINAL
fumecheng-1521	40	1	three	CARDINAL
fumecheng-1521	40	2	one	CARDINAL
fumecheng-1521	40	3	2 2	CARDINAL
fumecheng-1521	41	1	3	CARDINAL
fumecheng-1521	42	1	2	CARDINAL
fumecheng-1521	42	2	two	CARDINAL
fumecheng-1521	44	1	zero	CARDINAL
fumecheng-1521	44	2	p(r	PERSON
fumecheng-1521	47	1	3	CARDINAL
fumecheng-1521	47	2	p(r	PERSON
fumecheng-1521	48	1	dmax	ORG
fumecheng-1521	49	1	one	CARDINAL
fumecheng-1521	49	2	max	PERSON
fumecheng-1521	49	3	0 (	PERCENT
fumecheng-1521	51	1	  	PERSON
fumecheng-1521	51	2	4	CARDINAL
fumecheng-1521	51	3	three	CARDINAL
fumecheng-1521	51	4	9	CARDINAL
fumecheng-1521	51	5	0	CARDINAL
fumecheng-1521	51	6	0 (	PERCENT
fumecheng-1521	51	7	2	CARDINAL
fumecheng-1521	53	1	g x dx	PERSON
fumecheng-1521	55	1	  	PERSON
fumecheng-1521	57	1	5	CARDINAL
fumecheng-1521	58	1	5	CARDINAL
fumecheng-1521	59	1	three	CARDINAL
fumecheng-1521	59	2	two	CARDINAL
fumecheng-1521	59	3	dmax	ORG
fumecheng-1521	60	1	two	CARDINAL
fumecheng-1521	61	1	q. li	PERSON
fumecheng-1521	62	1	half	CARDINAL
fumecheng-1521	62	2	0	CARDINAL
fumecheng-1521	62	3	0	CARDINAL
fumecheng-1521	63	1	6	CARDINAL
fumecheng-1521	63	2	0	CARDINAL
fumecheng-1521	63	3	0	CARDINAL
fumecheng-1521	64	1	x	GPE
fumecheng-1521	64	2	xu x	PERSON
fumecheng-1521	64	3	7	CARDINAL
fumecheng-1521	65	1		PERSON
fumecheng-1521	67	1	2	CARDINAL
fumecheng-1521	67	2	four	CARDINAL
fumecheng-1521	68	1	two	CARDINAL
fumecheng-1521	69	1	1	CARDINAL
fumecheng-1521	71	1	6	CARDINAL
fumecheng-1521	71	2	0	CARDINAL
fumecheng-1521	71	3	0 0	PERCENT
fumecheng-1521	72	1	max	PERSON
fumecheng-1521	75	1	8)	CARDINAL
fumecheng-1521	76	1	2	CARDINAL
fumecheng-1521	76	2	2	CARDINAL
fumecheng-1521	78	1	0	CARDINAL
fumecheng-1521	78	2	0	CARDINAL
fumecheng-1521	80	1	  	PERSON
fumecheng-1521	80	2	9	CARDINAL
fumecheng-1521	80	3	g(c	PERSON
fumecheng-1521	80	4	0	CARDINAL
fumecheng-1521	80	5	0	CARDINAL
fumecheng-1521	84	1		DATE
fumecheng-1521	84	2	  	ORG
fumecheng-1521	84	3	10	CARDINAL
fumecheng-1521	84	4	0	CARDINAL
fumecheng-1521	84	5	0	CARDINAL
fumecheng-1521	88	1	   	PERSON
fumecheng-1521	88	2	11	CARDINAL
fumecheng-1521	88	3	g(c	PERSON
fumecheng-1521	88	4		PERSON
fumecheng-1521	88	5	g(c	PERSON
fumecheng-1521	88	6	0	CARDINAL
fumecheng-1521	88	7	0	CARDINAL
fumecheng-1521	89	1		PERSON
fumecheng-1521	90	1	12	CARDINAL
fumecheng-1521	90	2	59	CARDINAL
fumecheng-1521	91	1	11	CARDINAL
fumecheng-1521	92	1	= ω	ORG
fumecheng-1521	94	1	11	CARDINAL
fumecheng-1521	94	2	2	CARDINAL
fumecheng-1521	94	3	2(0	CARDINAL
fumecheng-1521	94	4	0	CARDINAL
fumecheng-1521	95	1	2	CARDINAL
fumecheng-1521	96	1	 	DATE
fumecheng-1521	96	2		GPE
fumecheng-1521	96	3		PERSON
fumecheng-1521	96	4		GPE
fumecheng-1521	97	1	13	CARDINAL
fumecheng-1521	97	2	two	CARDINAL
fumecheng-1521	97	3	dmax	ORG
fumecheng-1521	98	1	substitute eqs	PERSON
fumecheng-1521	98	2	8)	CARDINAL
fumecheng-1521	98	3	13	CARDINAL
fumecheng-1521	99	1	5	CARDINAL
fumecheng-1521	99	2	three	CARDINAL
fumecheng-1521	100	1	two	CARDINAL
fumecheng-1521	100	2	x0	ORG
fumecheng-1521	102	1	12	CARDINAL
fumecheng-1521	104	1	0	CARDINAL
fumecheng-1521	104	2	0	CARDINAL
fumecheng-1521	106	1	u e e	PERSON
fumecheng-1521	107	1	14	CARDINAL
fumecheng-1521	107	2	2	CARDINAL
fumecheng-1521	107	3		PERSON
fumecheng-1521	107	4		GPE
fumecheng-1521	108	1	u e e	PERSON
fumecheng-1521	109	1	15	CARDINAL
fumecheng-1521	111	1	one	CARDINAL
fumecheng-1521	112	1	2	CARDINAL
fumecheng-1521	113	1	18	CARDINAL
fumecheng-1521	115	1	dmax = d0+uz	ORG
fumecheng-1521	117	1	12	CARDINAL
fumecheng-1521	117	2	2	CARDINAL
fumecheng-1521	119	1	two	CARDINAL
fumecheng-1521	119	2	dmax	ORG
fumecheng-1521	120	1	5	CARDINAL
fumecheng-1521	122	1	3	CARDINAL
fumecheng-1521	124	1	0.5 1 1.5	CARDINAL
fumecheng-1521	124	2	0.2 0.4 0.6 0.8 1	QUANTITY
fumecheng-1521	125	1	3	CARDINAL
fumecheng-1521	125	2	q. li 4	PERSON
fumecheng-1521	127	1	9	CARDINAL
fumecheng-1521	128	1	half	CARDINAL
fumecheng-1521	129	1	two	CARDINAL
fumecheng-1521	129	2	9	CARDINAL
fumecheng-1521	130	1	two	CARDINAL
fumecheng-1521	132	1	parabolic indenter oscillating	ORG
fumecheng-1521	134	1	popov	PERSON
fumecheng-1521	135	1	1	CARDINAL
fumecheng-1521	136	1	kennedy	PERSON
fumecheng-1521	136	2	peterson	PERSON
fumecheng-1521	136	3	m.b.	GPE
fumecheng-1521	136	4	stallings, l., 1982	ORG
fumecheng-1521	137	1	astm	ORG
fumecheng-1521	140	1	30–48	CARDINAL
fumecheng-1521	141	1	2	CARDINAL
fumecheng-1521	141	2	zhang, h.	ORG
fumecheng-1521	141	3	l.a.	GPE
fumecheng-1521	141	4	jiang	PERSON
fumecheng-1521	141	5	x.	GPE
fumecheng-1521	141	6	s.m.	GPE
fumecheng-1521	141	7	2009	DATE
fumecheng-1521	141	8	266	CARDINAL
fumecheng-1521	142	1	566–569.	CARDINAL
fumecheng-1521	143	1	zheng	PERSON
fumecheng-1521	143	2	j. f. et al	PERSON
fumecheng-1521	143	3	2010	DATE
fumecheng-1521	145	1	43	CARDINAL
fumecheng-1521	146	1	906–911	CARDINAL
fumecheng-1521	146	2	4	CARDINAL
fumecheng-1521	146	3	m., 1985,	ORG
fumecheng-1521	146	4	106	DATE
fumecheng-1521	147	1	5–33.	CARDINAL
fumecheng-1521	148	1	5	CARDINAL
fumecheng-1521	148	2	m.p.	GPE
fumecheng-1521	148	3	farris	GPE
fumecheng-1521	148	4	t.n.	GPE
fumecheng-1521	148	5	1996	DATE
fumecheng-1521	148	6	198	CARDINAL
fumecheng-1521	149	1	93–107	CARDINAL
fumecheng-1521	150	1	6	CARDINAL
fumecheng-1521	150	2	fisher	ORG
fumecheng-1521	150	3	n.j.	GPE
fumecheng-1521	150	4	a.b.	GPE
fumecheng-1521	150	5	m.k.	GPE
fumecheng-1521	150	6	1995	DATE
fumecheng-1521	150	7	j. press	ORG
fumecheng-1521	151	1	vessel technol	PERSON
fumecheng-1521	151	2	117	CARDINAL
fumecheng-1521	152	1	312–320	CARDINAL
fumecheng-1521	153	1	liu	PERSON
fumecheng-1521	153	2	j., shen	PERSON
fumecheng-1521	153	3	h.m.	GPE
fumecheng-1521	153	4	yang	PERSON
fumecheng-1521	153	5	y.r.	GPE
fumecheng-1521	153	6	2014	DATE
fumecheng-1521	153	7	314	CARDINAL
fumecheng-1521	154	1	220–227	CARDINAL
fumecheng-1521	154	2	8	CARDINAL
fumecheng-1521	154	3	ciavarella	PERSON
fumecheng-1521	154	4	m.	PERSON
fumecheng-1521	154	5	2001	DATE
fumecheng-1521	155	1	j. solids	PERSON
fumecheng-1521	155	2	38	DATE
fumecheng-1521	157	1	9	CARDINAL
fumecheng-1521	158	1	popov	PERSON
fumecheng-1521	158	2	v.l.	GPE
fumecheng-1521	158	3	2014	DATE
fumecheng-1521	158	4	sci.	ORG
fumecheng-1521	158	5	4	CARDINAL
fumecheng-1521	158	6	3749	DATE
fumecheng-1521	159	1	10	CARDINAL
fumecheng-1521	160	1	a.v.	GPE
fumecheng-1521	160	2	dmitriev	PERSON
fumecheng-1521	160	3	a.i.	GPE
fumecheng-1521	160	4	y.s.	GPE
fumecheng-1521	160	5	popov v.l.	PERSON
fumecheng-1521	160	6	2014	DATE
fumecheng-1521	161	1	j. solids	PERSON
fumecheng-1521	161	2	51	DATE
fumecheng-1521	162	1	li	PERSON
fumecheng-1521	162	2	q.	PERSON
fumecheng-1521	162	3	filippov	GPE
fumecheng-1521	162	4	a.e.	GPE
fumecheng-1521	162	5	a.v.	GPE
fumecheng-1521	162	6	chai	ORG
fumecheng-1521	162	7	y.s.	GPE
fumecheng-1521	162	8	popov	PERSON
fumecheng-1521	162	9	v.l.	GPE
fumecheng-1521	162	10	2014	DATE
fumecheng-1521	163	1	mesomech	PERSON
fumecheng-1521	163	2	17	DATE
fumecheng-1521	164	1	236-241	CARDINAL
fumecheng-1521	165	1	12	CARDINAL
fumecheng-1521	166	1	a.v.	GPE
fumecheng-1521	166	2	dmitriev	PERSON
fumecheng-1521	166	3	a.i.	GPE
fumecheng-1521	166	4	menga	PERSON
fumecheng-1521	166	5	a.	PERSON
fumecheng-1521	166	6	ciavarella	ORG
fumecheng-1521	166	7	m., popov	PERSON
fumecheng-1521	166	8	v.l.	GPE
fumecheng-1521	166	9	2016	DATE
fumecheng-1521	167	1	59	DATE
fumecheng-1521	168	1	189-194	CARDINAL
fumecheng-1521	169	1	13	CARDINAL
fumecheng-1521	169	2	x.y.	PERSON
fumecheng-1521	169	3	liu	PERSON
fumecheng-1521	169	4	w.	PERSON
fumecheng-1521	169	5	y.z.	PERSON
fumecheng-1521	169	6	popov	PERSON
fumecheng-1521	169	7	v.l.	GPE
fumecheng-1521	169	8	2015	DATE
fumecheng-1521	169	9	j. mech	PERSON
fumecheng-1521	170	1	eng	PERSON
fumecheng-1521	171	1	sci.	ORG
fumecheng-1521	171	2	203	CARDINAL
fumecheng-1521	171	3	1989-1996	DATE
fumecheng-1521	172	1	14	CARDINAL
fumecheng-1521	173	1	a.v.	GPE
fumecheng-1521	173	2	popov	PERSON
fumecheng-1521	173	3	v.l.	GPE
fumecheng-1521	173	4	2015	DATE
fumecheng-1521	173	5	half	CARDINAL
fumecheng-1521	173	6	aip conf	ORG
fumecheng-1521	174	1	1683, 020040	DATE
fumecheng-1521	175	1	15	CARDINAL
fumecheng-1521	176	1	dmitriev	PERSON
fumecheng-1521	176	2	a.i.	GPE
fumecheng-1521	176	3	voll	NORP
fumecheng-1521	176	4	l.b.	GPE
fumecheng-1521	176	5	s.g.	GPE
fumecheng-1521	176	6	popov	PERSON
fumecheng-1521	176	7	v.l.	GPE
fumecheng-1521	176	8	2016	DATE
fumecheng-1521	176	9	sci.	ORG
fumecheng-1521	176	10	6, 23231	DATE
fumecheng-1521	177	1	16	CARDINAL
fumecheng-1521	178	1	reye	PERSON
fumecheng-1521	178	2	t.	GPE
fumecheng-1521	178	3	1860	DATE
fumecheng-1521	178	4	zur theorie der zapfenreibung	ORG
fumecheng-1521	178	5	4	DATE
fumecheng-1521	179	1	235–255	CARDINAL
fumecheng-1521	179	2	61 17	DATE
fumecheng-1521	180	1	popov	PERSON
fumecheng-1521	180	2	v.l.	GPE
fumecheng-1521	180	3	2010	DATE
fumecheng-1521	180	4	berlin	GPE
fumecheng-1521	180	5	18	CARDINAL
fumecheng-1521	181	1	popov	PERSON
fumecheng-1521	181	2	v.l.	GPE
fumecheng-1521	181	3	2013	DATE
fumecheng-1521	181	4	1	CARDINAL
fumecheng-1521	182	1	popov	PERSON
fumecheng-1521	182	2	v.l.	GPE
fumecheng-1521	182	3	m.	PERSON
fumecheng-1521	182	4	2015	DATE
fumecheng-1521	182	5	berlin	GPE
fumecheng-1521	183	1	20	CARDINAL
fumecheng-1521	183	2	m., 2011	PERSON
fumecheng-1521	183	3	abbildung ausgewählter dreidimensionaler kontakte auf	ORG
fumecheng-1521	184	1	21	CARDINAL
fumecheng-1521	184	2	m., 2012	PERSON
fumecheng-1521	185	1	mesomech	PERSON
fumecheng-1521	185	2	15	DATE
fumecheng-1521	186	1	264–269	CARDINAL