id	sid	eid	entity	type
fumecheng-5070	2	1	17	CARDINAL
fumecheng-5070	2	2	2019	DATE
fumecheng-5070	3	1	valentin popov technische	PERSON
fumecheng-5070	3	2	universität berlin	GPE
fumecheng-5070	3	3	10623	DATE
fumecheng-5070	3	4	berlin germany	GPE
fumecheng-5070	9	1	j. benad	PERSON
fumecheng-5070	11	1	three	CARDINAL
fumecheng-5070	11	2	bem	PERSON
fumecheng-5070	12	1	today	DATE
fumecheng-5070	12	2	bem	ORG
fumecheng-5070	13	1	half	CARDINAL
fumecheng-5070	14	1	three	CARDINAL
fumecheng-5070	14	2	j. benad	PERSON
fumecheng-5070	18	1	r. pohrt	PERSON
fumecheng-5070	19	1	popov	PERSON
fumecheng-5070	21	1	g. eremina	PERSON
fumecheng-5070	21	2	a. smolin	PERSON
fumecheng-5070	23	1	mca	ORG
fumecheng-5070	28	1	archard	PERSON
fumecheng-5070	33	1	popov	PERSON
fumecheng-5070	39	1	two	CARDINAL
fumecheng-5070	41	1	m. heß	PERSON
fumecheng-5070	44	1	wang et al	PERSON
fumecheng-5070	46	1	e. willert	PERSON
fumecheng-5070	49	1	e. willert	PERSON
fumecheng-5070	50	1	q. li et al	PERSON
fumecheng-5070	52	1	tricarico	NORP