id	sid	eid	entity	type
fumecheng-7188	1	1	7188	DATE
fumecheng-7188	1	2	21	CARDINAL
fumecheng-7188	1	3	2023	CARDINAL
fumecheng-7188	2	1	121 135	CARDINAL
fumecheng-7188	2	2	2023	CARDINAL
fumecheng-7188	2	3	university of niš	ORG
fumecheng-7188	2	4	serbia	GPE
fumecheng-7188	2	5	nc	GPE
fumecheng-7188	2	6	cmm	ORG
fumecheng-7188	2	7	mazur1	PRODUCT
fumecheng-7188	2	8	rucki1	PERSON
fumecheng-7188	3	1	radom	GPE
fumecheng-7188	3	2	poland 2national technical university	ORG
fumecheng-7188	3	3	kharkiv	GPE
fumecheng-7188	3	4	ukraine	GPE
fumecheng-7188	5	1	first	ORDINAL
fumecheng-7188	6	1	three	CARDINAL
fumecheng-7188	9	1	0.05 to 0.2 mm	QUANTITY
fumecheng-7188	9	2	30-40%	PERCENT
fumecheng-7188	10	1	cmm	ORG
fumecheng-7188	10	2	1	CARDINAL
fumecheng-7188	11	1	1,2	CARDINAL
fumecheng-7188	13	1	3	CARDINAL
fumecheng-7188	15	1	4	CARDINAL
fumecheng-7188	16	1	may 07	DATE
fumecheng-7188	16	2	2021	DATE
fumecheng-7188	16	3	october 20	DATE
fumecheng-7188	16	4	2021	CARDINAL
fumecheng-7188	16	5	kazimierz pulaski university of technology	ORG
fumecheng-7188	16	6	radom	GPE
fumecheng-7188	16	7	29	CARDINAL
fumecheng-7188	16	8	26	CARDINAL
fumecheng-7188	16	9	poland	GPE
fumecheng-7188	16	10	122	CARDINAL
fumecheng-7188	16	11	t. mazur	PERSON
fumecheng-7188	16	12	m. rucki	PERSON
fumecheng-7188	16	13	5	CARDINAL
fumecheng-7188	19	1	6	CARDINAL
fumecheng-7188	20	1	two	CARDINAL
fumecheng-7188	20	2	1	CARDINAL
fumecheng-7188	20	3	2	CARDINAL
fumecheng-7188	22	1	8	CARDINAL
fumecheng-7188	23	1	menq	ORG
fumecheng-7188	23	2	chen	PERSON
fumecheng-7188	25	1	9	CARDINAL
fumecheng-7188	26	1	3d	CARDINAL
fumecheng-7188	26	2	cmm geometric	ORG
fumecheng-7188	26	3	10	CARDINAL
fumecheng-7188	28	1	11	CARDINAL
fumecheng-7188	29	1	cmm	ORG
fumecheng-7188	29	2	12	CARDINAL
fumecheng-7188	30	1	13	CARDINAL
fumecheng-7188	31	1	25	CARDINAL
fumecheng-7188	32	1	14	CARDINAL
fumecheng-7188	33	1	15	CARDINAL
fumecheng-7188	34	1	16	CARDINAL
fumecheng-7188	35	1	17	CARDINAL
fumecheng-7188	36	1	cmm	ORG
fumecheng-7188	36	2	18	CARDINAL
fumecheng-7188	37	1	19	CARDINAL
fumecheng-7188	38	1	20	CARDINAL
fumecheng-7188	41	1	21	CARDINAL
fumecheng-7188	44	1	22	CARDINAL
fumecheng-7188	45	1	saunders	ORG
fumecheng-7188	45	2	cmm	ORG
fumecheng-7188	45	3	123	CARDINAL
fumecheng-7188	46	1	23	CARDINAL
fumecheng-7188	47	1	iso 1101	FAC
fumecheng-7188	47	2	24	CARDINAL
fumecheng-7188	49	1	2d	DATE
fumecheng-7188	50	1	2d	DATE
fumecheng-7188	50	2	25	CARDINAL
fumecheng-7188	51	1	±0.1 mm	PERSON
fumecheng-7188	52	1	26	CARDINAL
fumecheng-7188	53	1	2d	DATE
fumecheng-7188	56	1	2	CARDINAL
fumecheng-7188	56	2	2d	DATE
fumecheng-7188	58	1	1	CARDINAL
fumecheng-7188	58	2	0.15 mm	QUANTITY
fumecheng-7188	59	1	1.25 μm	CARDINAL
fumecheng-7188	59	2	6.3 μm	CARDINAL
fumecheng-7188	61	1	1	CARDINAL
fumecheng-7188	61	2	2019	DATE
fumecheng-7188	62	1	fig	ORG
fumecheng-7188	63	1	1	CARDINAL
fumecheng-7188	63	2	124	CARDINAL
fumecheng-7188	63	3	m. rucki	PERSON
fumecheng-7188	63	4	cmm	ORG
fumecheng-7188	64	1	2829	CARDINAL
fumecheng-7188	65	1	approximately uniformly 1 mm	QUANTITY
fumecheng-7188	68	1	mitutoyo crysta	PERSON
fumecheng-7188	68	2	7106	DATE
fumecheng-7188	69	1	cnc	ORG
fumecheng-7188	69	2	iso 10360-2:2009	ORG
fumecheng-7188	69	3	1.7+3l/1000	CARDINAL
fumecheng-7188	69	4	20 ±2 °	QUANTITY
fumecheng-7188	70	1	mm	PERSON
fumecheng-7188	71	1	three	CARDINAL
fumecheng-7188	71	2	700	CARDINAL
fumecheng-7188	71	3	1000	CARDINAL
fumecheng-7188	71	4	600 mm	QUANTITY
fumecheng-7188	71	5	3d	CARDINAL
fumecheng-7188	71	6	2309 mm/s2	QUANTITY
fumecheng-7188	71	7	three	CARDINAL
fumecheng-7188	71	8	519 mm	QUANTITY
fumecheng-7188	71	9	cmm	ORG
fumecheng-7188	71	10	16÷26 °	QUANTITY
fumecheng-7188	72	1	27	CARDINAL
fumecheng-7188	73	1	0.05-1.0	CARDINAL
fumecheng-7188	73	2	between 0.5	CARDINAL
fumecheng-7188	73	3	0.15 to	QUANTITY
fumecheng-7188	73	4	0.4 mm	QUANTITY
fumecheng-7188	74	1	lcs	ORG
fumecheng-7188	74	2	2	DATE
fumecheng-7188	75	1	3	CARDINAL
fumecheng-7188	77	1	2	CARDINAL
fumecheng-7188	77	2	cmm	ORG
fumecheng-7188	77	3	cmm	ORG
fumecheng-7188	77	4	125	CARDINAL
fumecheng-7188	79	1	one	CARDINAL
fumecheng-7188	79	2	one	CARDINAL
fumecheng-7188	80	1	2	CARDINAL
fumecheng-7188	81	1	lcs	ORG
fumecheng-7188	81	2	4	CARDINAL
fumecheng-7188	81	3	4	CARDINAL
fumecheng-7188	81	4	three	CARDINAL
fumecheng-7188	81	5	two	CARDINAL
fumecheng-7188	81	6	first	ORDINAL
fumecheng-7188	81	7	third	ORDINAL
fumecheng-7188	81	8	second	ORDINAL
fumecheng-7188	82	1	fig	ORG
fumecheng-7188	83	1	3	CARDINAL
fumecheng-7188	83	2	cmm	ORG
fumecheng-7188	86	1	cmm	ORG
fumecheng-7188	89	1	cnc	ORG
fumecheng-7188	89	2	cnc	ORG
fumecheng-7188	89	3	126	CARDINAL
fumecheng-7188	89	4	m. rucki	PERSON
fumecheng-7188	89	5	3	CARDINAL
fumecheng-7188	89	6	three	CARDINAL
fumecheng-7188	90	1	three	CARDINAL
fumecheng-7188	90	2	between 0.5	CARDINAL
fumecheng-7188	90	3	between 0.15	CARDINAL
fumecheng-7188	90	4	0.4 mm	PERSON
fumecheng-7188	91	1	1	CARDINAL
fumecheng-7188	91	2	1	CARDINAL
fumecheng-7188	94	1	3 1 0.3 0.2 5	QUANTITY
fumecheng-7188	94	2	3×5+1×10+1×25	DATE
fumecheng-7188	94	3	10	CARDINAL
fumecheng-7188	94	4	three	CARDINAL
fumecheng-7188	95	1	3.1	CARDINAL
fumecheng-7188	95	2	first	ORDINAL
fumecheng-7188	96	1	0.2 mm	QUANTITY
fumecheng-7188	97	1	1	CARDINAL
fumecheng-7188	97	2	16	CARDINAL
fumecheng-7188	98	1	5	CARDINAL
fumecheng-7188	99	1	645	CARDINAL
fumecheng-7188	99	2	660	CARDINAL
fumecheng-7188	99	3	3.2	CARDINAL
fumecheng-7188	101	1	28-29	CARDINAL
fumecheng-7188	102	1	30	CARDINAL
fumecheng-7188	102	2	50	CARDINAL
fumecheng-7188	102	3	cmm	ORG
fumecheng-7188	102	4	127	CARDINAL
fumecheng-7188	103	1	two	CARDINAL
fumecheng-7188	103	2	17	CARDINAL
fumecheng-7188	103	3	18	CARDINAL
fumecheng-7188	103	4	1	CARDINAL
fumecheng-7188	103	5	3 mm	QUANTITY
fumecheng-7188	104	1	0.15 mm	QUANTITY
fumecheng-7188	106	1	17	CARDINAL
fumecheng-7188	106	2	0.2 mm	QUANTITY
fumecheng-7188	107	1	650	CARDINAL
fumecheng-7188	107	2	18	CARDINAL
fumecheng-7188	107	3	2560	CARDINAL
fumecheng-7188	108	1	3.3	CARDINAL
fumecheng-7188	108	2	1 mm	QUANTITY
fumecheng-7188	108	3	50	CARDINAL
fumecheng-7188	109	1	third	ORDINAL
fumecheng-7188	110	1	9	CARDINAL
fumecheng-7188	110	2	1	CARDINAL
fumecheng-7188	110	3	3 mm	QUANTITY
fumecheng-7188	110	4	0.15 mm	QUANTITY
fumecheng-7188	110	5	0.2 mm	QUANTITY
fumecheng-7188	110	6	three	CARDINAL
fumecheng-7188	110	7	5	CARDINAL
fumecheng-7188	110	8	10	CARDINAL
fumecheng-7188	110	9	25	CARDINAL
fumecheng-7188	112	1	1 as	CARDINAL
fumecheng-7188	113	1	50	CARDINAL
fumecheng-7188	115	1	section 3.1	LAW
fumecheng-7188	115	2	the same day	DATE
fumecheng-7188	119	1	section 3.2	LAW
fumecheng-7188	119	2	several months later	DATE
fumecheng-7188	120	1	17	CARDINAL
fumecheng-7188	120	2	two	CARDINAL
fumecheng-7188	121	1	4	CARDINAL
fumecheng-7188	121	2	225	CARDINAL
fumecheng-7188	122	1	kolmogorov-smirnov	ORG
fumecheng-7188	122	2	50	CARDINAL
fumecheng-7188	122	3	9	CARDINAL
fumecheng-7188	122	4	17	DATE
fumecheng-7188	122	5	18	DATE
fumecheng-7188	123	1	0.1789	CARDINAL
fumecheng-7188	123	2	0.14551	CARDINAL
fumecheng-7188	123	3	0.18754	GPE
fumecheng-7188	123	4	0.07	CARDINAL
fumecheng-7188	123	5	0.22	CARDINAL
fumecheng-7188	123	6	0.05	CARDINAL
fumecheng-7188	125	1	fig	ORG
fumecheng-7188	126	1	4	CARDINAL
fumecheng-7188	127	1	128	CARDINAL
fumecheng-7188	127	2	t. mazur	PERSON
fumecheng-7188	127	3	m. rucki	PERSON
fumecheng-7188	128	1	4	CARDINAL
fumecheng-7188	128	2	50	CARDINAL
fumecheng-7188	128	3	9	CARDINAL
fumecheng-7188	128	4	17	DATE
fumecheng-7188	128	5	18	CARDINAL
fumecheng-7188	128	6	5	CARDINAL
fumecheng-7188	128	7	10	CARDINAL
fumecheng-7188	128	8	25	CARDINAL
fumecheng-7188	129	1	ci = tα	PERSON
fumecheng-7188	129	2	1	CARDINAL
fumecheng-7188	129	3	sn	ORG
fumecheng-7188	130	1	0.99	CARDINAL
fumecheng-7188	130	2	5	CARDINAL
fumecheng-7188	130	3	4.604	CARDINAL
fumecheng-7188	130	4	10	CARDINAL
fumecheng-7188	130	5	3.250	CARDINAL
fumecheng-7188	130	6	25	CARDINAL
fumecheng-7188	132	1	2.797	CARDINAL
fumecheng-7188	132	2	31	CARDINAL
fumecheng-7188	132	3	4.1	CARDINAL
fumecheng-7188	132	4	2-5	DATE
fumecheng-7188	133	1	1	CARDINAL
fumecheng-7188	133	2	4	CARDINAL
fumecheng-7188	134	1	0.15 mm	QUANTITY
fumecheng-7188	134	2	one	CARDINAL
fumecheng-7188	134	3	5	CARDINAL
fumecheng-7188	135	1	2	CARDINAL
fumecheng-7188	135	2	1 mm	QUANTITY
fumecheng-7188	136	1	0.4 mm	PERSON
fumecheng-7188	144	1	1 0.118	CARDINAL
fumecheng-7188	144	2	145	CARDINAL
fumecheng-7188	144	3	145	CARDINAL
fumecheng-7188	144	4	0.116 205	CARDINAL
fumecheng-7188	144	5	177	MONEY
fumecheng-7188	144	6	154	CARDINAL
fumecheng-7188	144	7	146	CARDINAL
fumecheng-7188	144	8	199	CARDINAL
fumecheng-7188	144	9	146	CARDINAL
fumecheng-7188	144	10	0.118 201.2	MONEY
fumecheng-7188	144	11	145.8	CARDINAL
fumecheng-7188	144	12	sn	ORG
fumecheng-7188	144	13	0.001	CARDINAL
fumecheng-7188	144	14	0.007	CARDINAL
fumecheng-7188	144	15	0.003 3.85	CARDINAL
fumecheng-7188	144	16	cmm	ORG
fumecheng-7188	144	17	129	CARDINAL
fumecheng-7188	144	18	3	CARDINAL
fumecheng-7188	144	19	2 mm	QUANTITY
fumecheng-7188	145	1	0.4 mm	PERSON
fumecheng-7188	153	1	1	CARDINAL
fumecheng-7188	153	2	95	CARDINAL
fumecheng-7188	153	3	75 3	DATE
fumecheng-7188	153	4	95	CARDINAL
fumecheng-7188	153	5	0.116 97	CARDINAL
fumecheng-7188	153	6	74 5	DATE
fumecheng-7188	153	7	0.117	CARDINAL
fumecheng-7188	153	8	0.115	CARDINAL
fumecheng-7188	153	9	76.8 0.113	DATE
fumecheng-7188	153	10	74.2	CARDINAL
fumecheng-7188	153	11	sn	ORG
fumecheng-7188	153	12	0.002 1.095 0.000 0.000	MONEY
fumecheng-7188	153	13	0.008 5.04 0.002 0.000 0.011	QUANTITY
fumecheng-7188	153	14	0.005 3.85	CARDINAL
fumecheng-7188	153	15	4	CARDINAL
fumecheng-7188	153	16	3 mm	QUANTITY
fumecheng-7188	153	17	9-12	CARDINAL
fumecheng-7188	154	1	0.4 mm	PERSON
fumecheng-7188	162	1	1	CARDINAL
fumecheng-7188	162	2	0.116 56	CARDINAL
fumecheng-7188	162	3	3 0.117	CARDINAL
fumecheng-7188	162	4	49	DATE
fumecheng-7188	162	5	0.117 61.8	MONEY
fumecheng-7188	162	6	56.2	CARDINAL
fumecheng-7188	162	7	49.6	MONEY
fumecheng-7188	162	8	48.4	CARDINAL
fumecheng-7188	162	9	sn	ORG
fumecheng-7188	162	10	0.002	CARDINAL
fumecheng-7188	162	11	1.342	TIME
fumecheng-7188	162	12	0.008	CARDINAL
fumecheng-7188	162	13	0.015 6.18	CARDINAL
fumecheng-7188	162	14	5	CARDINAL
fumecheng-7188	162	15	1 mm	QUANTITY
fumecheng-7188	162	16	0.4 mm	PERSON
fumecheng-7188	170	1	1	CARDINAL
fumecheng-7188	170	2	38	CARDINAL
fumecheng-7188	170	3	0.115	CARDINAL
fumecheng-7188	170	4	0.115	CARDINAL
fumecheng-7188	170	5	0.115	CARDINAL
fumecheng-7188	170	6	0.118 38	TIME
fumecheng-7188	170	7	0.117 48.6 0.116	MONEY
fumecheng-7188	170	8	0.116 37.6	CARDINAL
fumecheng-7188	170	9	sn	ORG
fumecheng-7188	170	10	0.002	CARDINAL
fumecheng-7188	170	11	0.008	CARDINAL
fumecheng-7188	170	12	0.016 2.52	CARDINAL
fumecheng-7188	170	13	22-28%	PERCENT
fumecheng-7188	171	1	1-6%	PERCENT
fumecheng-7188	173	1	5	CARDINAL
fumecheng-7188	174	1	0.2 mm	PERSON
fumecheng-7188	174	2	1.7+3l/1000	CARDINAL
fumecheng-7188	174	3	cmm	ORG
fumecheng-7188	176	1	0.15 and 0.2 mm	QUANTITY
fumecheng-7188	176	2	1 μm	CARDINAL
fumecheng-7188	177	1	130	CARDINAL
fumecheng-7188	177	2	t. mazur	ORG
fumecheng-7188	177	3	m. rucki	PERSON
fumecheng-7188	178	1	0.2 mm	QUANTITY
fumecheng-7188	179	1	fig	ORG
fumecheng-7188	180	1	5	CARDINAL
fumecheng-7188	181	1	6	CARDINAL
fumecheng-7188	182	1	6	CARDINAL
fumecheng-7188	182	2	0.2 mm	QUANTITY
fumecheng-7188	184	1	pd= 0.4 mm	PERSON
fumecheng-7188	184	2	1	CARDINAL
fumecheng-7188	184	3	38	CARDINAL
fumecheng-7188	184	4	0.115	CARDINAL
fumecheng-7188	184	5	0.115	CARDINAL
fumecheng-7188	184	6	0.016 2.52	CARDINAL
fumecheng-7188	185	1	almost 40%	PERCENT
fumecheng-7188	186	1	0.2 mm	QUANTITY
fumecheng-7188	187	1	100%	PERCENT
fumecheng-7188	187	2	30-40%	PERCENT
fumecheng-7188	188	1	4.0	CARDINAL
fumecheng-7188	188	2	32	CARDINAL
fumecheng-7188	189	1	4.2	CARDINAL
fumecheng-7188	189	2	three	CARDINAL
fumecheng-7188	189	3	50	CARDINAL
fumecheng-7188	190	1	99%	PERCENT
fumecheng-7188	190	2	kp	ORG
fumecheng-7188	190	3	2.576	CARDINAL
fumecheng-7188	191	1	28	CARDINAL
fumecheng-7188	192	1	9	CARDINAL
fumecheng-7188	192	2	cmm	ORG
fumecheng-7188	192	3	131	CARDINAL
fumecheng-7188	192	4	17	CARDINAL
fumecheng-7188	194	1	7	CARDINAL
fumecheng-7188	195	1	7	CARDINAL
fumecheng-7188	195	2	7	CARDINAL
fumecheng-7188	195	3	50	CARDINAL
fumecheng-7188	195	4	9	CARDINAL
fumecheng-7188	195	5	0.1151 0.1137 0.1152	MONEY
fumecheng-7188	195	6	0.00158 0.00195 0.00142	MONEY
fumecheng-7188	195	7	0.004	CARDINAL
fumecheng-7188	196	1	6	CARDINAL
fumecheng-7188	196	2	0.113 mm	QUANTITY
fumecheng-7188	196	3	0.2 mm	QUANTITY
fumecheng-7188	196	4	660	CARDINAL
fumecheng-7188	196	5	7	CARDINAL
fumecheng-7188	197	1	9	CARDINAL
fumecheng-7188	197	2	18	DATE
fumecheng-7188	197	3	17	CARDINAL
fumecheng-7188	197	4	two	CARDINAL
fumecheng-7188	197	5	9	CARDINAL
fumecheng-7188	197	6	18	CARDINAL
fumecheng-7188	198	1	three	CARDINAL
fumecheng-7188	200	1	132	CARDINAL
fumecheng-7188	200	2	m. rucki	PERSON
fumecheng-7188	201	1	7	CARDINAL
fumecheng-7188	201	2	0.113 mm	QUANTITY
fumecheng-7188	201	3	0.2 mm	QUANTITY
fumecheng-7188	201	4	0.116 mm	QUANTITY
fumecheng-7188	205	1	4.3	CARDINAL
fumecheng-7188	205	2	8	CARDINAL
fumecheng-7188	205	3	9	CARDINAL
fumecheng-7188	205	4	section 3.3	LAW
fumecheng-7188	206	1	first	ORDINAL
fumecheng-7188	206	2	9	CARDINAL
fumecheng-7188	206	3	second	ORDINAL
fumecheng-7188	206	4	5	CARDINAL
fumecheng-7188	206	5	1st	ORDINAL
fumecheng-7188	206	6	5	CARDINAL
fumecheng-7188	206	7	the 2nd and 3rd	DATE
fumecheng-7188	206	8	10	CARDINAL
fumecheng-7188	206	9	4th	ORDINAL
fumecheng-7188	206	10	25	CARDINAL
fumecheng-7188	206	11	5th	ORDINAL
fumecheng-7188	207	1	sn	ORG
fumecheng-7188	207	2	the last row	DATE
fumecheng-7188	207	3	9	CARDINAL
fumecheng-7188	207	4	fig	PERSON
fumecheng-7188	208	1	8	CARDINAL
fumecheng-7188	208	2	5	CARDINAL
fumecheng-7188	209	1	8	CARDINAL
fumecheng-7188	209	2	3 mm	QUANTITY
fumecheng-7188	209	3	0.2 mm	QUANTITY
fumecheng-7188	210	1	sn ci	PERSON
fumecheng-7188	211	1	2.06	CARDINAL
fumecheng-7188	211	2	0.1151	CARDINAL
fumecheng-7188	211	3	1.646 4.41	CARDINAL
fumecheng-7188	211	4	cmm	ORG
fumecheng-7188	211	5	133	CARDINAL
fumecheng-7188	212	1	8	CARDINAL
fumecheng-7188	212	2	first	ORDINAL
fumecheng-7188	212	3	three	CARDINAL
fumecheng-7188	212	4	2	CARDINAL
fumecheng-7188	212	5	3	CARDINAL
fumecheng-7188	212	6	2.2 μm	QUANTITY
fumecheng-7188	212	7	1	CARDINAL
fumecheng-7188	212	8	1	CARDINAL
fumecheng-7188	212	9	3	CARDINAL
fumecheng-7188	212	10	2 almost 50%	PERCENT
fumecheng-7188	213	1	10	CARDINAL
fumecheng-7188	213	2	0.0041	CARDINAL
fumecheng-7188	213	3	0.0032	CARDINAL
fumecheng-7188	214	1	4	CARDINAL
fumecheng-7188	214	2	2	CARDINAL
fumecheng-7188	214	3	3	CARDINAL
fumecheng-7188	214	4	5	CARDINAL
fumecheng-7188	215	1	1.7+3l/1000	CARDINAL
fumecheng-7188	216	1	5	CARDINAL
fumecheng-7188	218	1	0.05 to 0.2 mm	QUANTITY
fumecheng-7188	219	1	134	CARDINAL
fumecheng-7188	219	2	t. mazur	ORG
fumecheng-7188	219	3	m. rucki	PERSON
fumecheng-7188	219	4	30-40%	PERCENT
fumecheng-7188	220	1	100%	PERCENT
fumecheng-7188	221	1	cmm	ORG
fumecheng-7188	223	1	99%	PERCENT
fumecheng-7188	223	2	0.005 mm	QUANTITY
fumecheng-7188	223	3	less than 10%	PERCENT
fumecheng-7188	224	1	cmm	PRODUCT
fumecheng-7188	225	1	kazimierz pulaski university of technology	ORG
fumecheng-7188	225	2	radom	GPE
fumecheng-7188	225	3	poland	GPE
fumecheng-7188	227	1	1	CARDINAL
fumecheng-7188	228	1	m.	PERSON
fumecheng-7188	228	2	2019	DATE
fumecheng-7188	228	3	5	CARDINAL
fumecheng-7188	228	4	71	DATE
fumecheng-7188	228	5	30-42	CARDINAL
fumecheng-7188	229	1	2	CARDINAL
fumecheng-7188	229	2	kostazos	PERSON
fumecheng-7188	229	3	2021	CARDINAL
fumecheng-7188	229	4	10.22190	CARDINAL
fumecheng-7188	230	1	3	CARDINAL
fumecheng-7188	230	2	jiang	PERSON
fumecheng-7188	230	3	x. j.	PERSON
fumecheng-7188	230	4	scott	ORG
fumecheng-7188	230	5	j., 2020	ORG
fumecheng-7188	230	6	chapter 10	LAW
fumecheng-7188	230	7	x.j. jiang	PERSON
fumecheng-7188	230	8	p.j. scott (eds.	ORG
fumecheng-7188	231	1	247-280	CARDINAL
fumecheng-7188	232	1	4	CARDINAL
fumecheng-7188	232	2	fleischer	PERSON
fumecheng-7188	232	3	j., munzinger	PERSON
fumecheng-7188	232	4	d.	NORP
fumecheng-7188	232	5	2009	DATE
fumecheng-7188	232	6	58(1	CARDINAL
fumecheng-7188	233	1	481	CARDINAL
fumecheng-7188	234	1	5	CARDINAL
fumecheng-7188	234	2	weckenmann	PERSON
fumecheng-7188	234	3	a.	PERSON
fumecheng-7188	234	4	knauer	NORP
fumecheng-7188	234	5	m.	PERSON
fumecheng-7188	234	6	1998	DATE
fumecheng-7188	235	1	451	CARDINAL
fumecheng-7188	236	1	6	CARDINAL
fumecheng-7188	236	2	poniatowska	ORG
fumecheng-7188	236	3	m., 2012	PERSON
fumecheng-7188	236	4	45(5	CARDINAL
fumecheng-7188	236	5	927	CARDINAL
fumecheng-7188	237	1	7	CARDINAL
fumecheng-7188	237	2	xiong	GPE
fumecheng-7188	237	3	y.l.	GPE
fumecheng-7188	237	4	1990	DATE
fumecheng-7188	237	5	30(3	CARDINAL
fumecheng-7188	238	1	339-357	QUANTITY
fumecheng-7188	238	2	8	CARDINAL
fumecheng-7188	239	1	lou, s.	PERSON
fumecheng-7188	239	2	s.b.	GPE
fumecheng-7188	239	3	sun	PERSON
fumecheng-7188	239	4	zeng	PERSON
fumecheng-7188	239	5	w.	PERSON
fumecheng-7188	239	6	jiang	GPE
fumecheng-7188	239	7	x.	GPE
fumecheng-7188	239	8	scott	GPE
fumecheng-7188	239	9	p.j.	GPE
fumecheng-7188	239	10	2019	DATE
fumecheng-7188	239	11	144	CARDINAL
fumecheng-7188	240	1	173-182	CARDINAL
fumecheng-7188	241	1	9	CARDINAL
fumecheng-7188	241	2	menq	ORG
fumecheng-7188	241	3	c., chen	PERSON
fumecheng-7188	241	4	f.l.	GPE
fumecheng-7188	241	5	1996	DATE
fumecheng-7188	241	6	cmm measurement data	ORG
fumecheng-7188	242	1	engng	NORP
fumecheng-7188	243	1	211-225	CARDINAL
fumecheng-7188	244	1	10	CARDINAL
fumecheng-7188	245	1	lin	PERSON
fumecheng-7188	245	2	h.	PERSON
fumecheng-7188	245	3	keller	PERSON
fumecheng-7188	245	4	f.	PERSON
fumecheng-7188	245	5	stein	PERSON
fumecheng-7188	245	6	2020	DATE
fumecheng-7188	245	7	cmm geometric	ORG
fumecheng-7188	245	8	3d	CARDINAL
fumecheng-7188	245	9	151	CARDINAL
fumecheng-7188	245	10	107110	DATE
fumecheng-7188	246	1	11	CARDINAL
fumecheng-7188	247	1	d.	NORP
fumecheng-7188	247	2	zhao	PERSON
fumecheng-7188	247	3	z.	PERSON
fumecheng-7188	247	4	x.	GPE
fumecheng-7188	247	5	xu	PERSON
fumecheng-7188	247	6	j., 2020	PERSON
fumecheng-7188	247	7	151	CARDINAL
fumecheng-7188	247	8	107236	DATE
fumecheng-7188	248	1	12	CARDINAL
fumecheng-7188	249	1	adam wozniak	PERSON
fumecheng-7188	249	2	a.	PERSON
fumecheng-7188	249	3	krajewski	PERSON
fumecheng-7188	249	4	g.	PERSON
fumecheng-7188	249	5	byszewski	PERSON
fumecheng-7188	249	6	m.	PERSON
fumecheng-7188	249	7	2019	DATE
fumecheng-7188	249	8	134	CARDINAL
fumecheng-7188	249	9	814-819	CARDINAL
fumecheng-7188	250	1	zhang y.	PERSON
fumecheng-7188	250	2	chen, z., zhu	PERSON
fumecheng-7188	250	3	z.	PERSON
fumecheng-7188	250	4	wang	PERSON
fumecheng-7188	250	5	x.	GPE
fumecheng-7188	250	6	2020	DATE
fumecheng-7188	250	7	163	CARDINAL
fumecheng-7188	250	8	107949	DATE
fumecheng-7188	251	1	14	CARDINAL
fumecheng-7188	252	1	p.b.	PERSON
fumecheng-7188	252	2	2006	DATE
fumecheng-7188	252	3	cmm	ORG
fumecheng-7188	252	4	39(6	CARDINAL
fumecheng-7188	253	1	522-531	CARDINAL
fumecheng-7188	254	1	15	CARDINAL
fumecheng-7188	255	1	kubátová	PERSON
fumecheng-7188	255	2	d.	NORP
fumecheng-7188	255	3	kutlwašer	PERSON
fumecheng-7188	255	4	j., 2017	ORG
fumecheng-7188	255	5	13	CARDINAL
fumecheng-7188	256	1	558-564	CARDINAL
fumecheng-7188	257	1	16	CARDINAL
fumecheng-7188	258	1	raja	PERSON
fumecheng-7188	258	2	j.	PERSON
fumecheng-7188	258	3	muralikrishnan	GPE
fumecheng-7188	258	4	b.	PERSON
fumecheng-7188	258	5	fu	NORP
fumecheng-7188	258	6	2002	DATE
fumecheng-7188	258	7	26(2	CARDINAL
fumecheng-7188	259	1	222	CARDINAL
fumecheng-7188	260	1	17	CARDINAL
fumecheng-7188	261	1	raghu, s.	PERSON
fumecheng-7188	261	2	mamatha	GPE
fumecheng-7188	261	3	t.g.	GPE
fumecheng-7188	261	4	pali	PERSON
fumecheng-7188	261	5	h.s.	GPE
fumecheng-7188	261	6	sharma	PERSON
fumecheng-7188	261	7	r.	NORP
fumecheng-7188	261	8	vimal	GPE
fumecheng-7188	261	9	j.r.	GPE
fumecheng-7188	261	10	kumar v.	PERSON
fumecheng-7188	261	11	2020	DATE
fumecheng-7188	261	12	today	DATE
fumecheng-7188	262	1	821-826	CARDINAL
fumecheng-7188	263	1	cmm	ORG
fumecheng-7188	263	2	135 18	DATE
fumecheng-7188	264	1	kalish	ORG
fumecheng-7188	264	2	n. j.	PERSON
fumecheng-7188	264	3	davidson	GPE
fumecheng-7188	264	4	j. k.	PERSON
fumecheng-7188	264	5	j.j.	GPE
fumecheng-7188	264	6	2020	DATE
fumecheng-7188	264	7	92	CARDINAL
fumecheng-7188	265	1	39-44	DATE
fumecheng-7188	266	1	19	CARDINAL
fumecheng-7188	267	1	wang	PERSON
fumecheng-7188	267	2	sun	PERSON
fumecheng-7188	267	3	2019	DATE
fumecheng-7188	267	4	cmm	ORG
fumecheng-7188	267	5	56	DATE
fumecheng-7188	268	1	280	CARDINAL
fumecheng-7188	269	1	20	CARDINAL
fumecheng-7188	270	1	gąska	ORG
fumecheng-7188	270	2	a.	PERSON
fumecheng-7188	270	3	harmatys	GPE
fumecheng-7188	270	4	w.	PERSON
fumecheng-7188	270	5	gąska	ORG
fumecheng-7188	270	6	k., ostrowska	PERSON
fumecheng-7188	270	7	k., 2017	PERSON
fumecheng-7188	270	8	98	CARDINAL
fumecheng-7188	271	1	361-371	CARDINAL
fumecheng-7188	273	1	zhou	PERSON
fumecheng-7188	273	2	z.	PERSON
fumecheng-7188	273	3	k.	PERSON
fumecheng-7188	273	4	2016	DATE
fumecheng-7188	273	5	five	CARDINAL
fumecheng-7188	273	6	77	DATE
fumecheng-7188	274	1	1-17	CARDINAL
fumecheng-7188	276	1	oxford	NORP
fumecheng-7188	276	2	english	NORP
fumecheng-7188	277	1	oxford university	ORG
fumecheng-7188	278	1	2013	DATE
fumecheng-7188	278	2	n. oed online	ORG
fumecheng-7188	279	1	december 17, 2013	DATE
fumecheng-7188	279	2	23	CARDINAL
fumecheng-7188	280	1	saunders	ORG
fumecheng-7188	280	2	wilson, a.	ORG
fumecheng-7188	280	3	maropoulos	PERSON
fumecheng-7188	280	4	2014	DATE
fumecheng-7188	280	5	25	CARDINAL
fumecheng-7188	281	1	19	CARDINAL
fumecheng-7188	282	1	24	CARDINAL
fumecheng-7188	284	1	25	CARDINAL
fumecheng-7188	285	1	qiu, h.	ORG
fumecheng-7188	285	2	li	PERSON
fumecheng-7188	285	3	cheng	PERSON
fumecheng-7188	285	4	k.	PERSON
fumecheng-7188	285	5	li	PERSON
fumecheng-7188	285	6	2000	DATE
fumecheng-7188	285	7	two	CARDINAL
fumecheng-7188	285	8	40	DATE
fumecheng-7188	286	1	259–275	CARDINAL
fumecheng-7188	286	2	26	CARDINAL
fumecheng-7188	287	1	j., ma	PERSON
fumecheng-7188	287	2	sun, a.	PERSON
fumecheng-7188	287	3	zh.	PERSON
fumecheng-7188	287	4	2020	DATE
fumecheng-7188	287	5	149	CARDINAL
fumecheng-7188	287	6	107023	DATE
fumecheng-7188	288	1	27	CARDINAL
fumecheng-7188	290	1	2173	CARDINAL
fumecheng-7188	290	2	mitutoyo	ORG
fumecheng-7188	290	3	december	DATE
fumecheng-7188	290	4	7	DATE
fumecheng-7188	290	5	2020	DATE
fumecheng-7188	291	1	28	CARDINAL
fumecheng-7188	292	1	gapinski	PERSON
fumecheng-7188	292	2	b.	PERSON
fumecheng-7188	292	3	m., rucki	GPE
fumecheng-7188	292	4	m., 2006	PERSON
fumecheng-7188	292	5	26(1	CARDINAL
fumecheng-7188	293	1	1-6	CARDINAL
fumecheng-7188	294	1	gapinski	PERSON
fumecheng-7188	294	2	b.	PERSON
fumecheng-7188	294	3	rucki	GPE
fumecheng-7188	294	4	m., 2008	PERSON
fumecheng-7188	294	5	cmm, 2008 ieee international workshop	ORG
fumecheng-7188	295	1	108	CARDINAL
fumecheng-7188	295	2	10.1109/amuem.2008.4589944 30	MONEY
fumecheng-7188	296	1	jcgm 100:2008	PERSON
fumecheng-7188	298	1	31	CARDINAL
fumecheng-7188	299	1	jezierski	PERSON
fumecheng-7188	299	2	j., kowalik	GPE
fumecheng-7188	299	3	m.	PERSON
fumecheng-7188	299	4	siemiatkowski	PERSON
fumecheng-7188	299	5	z.	PERSON
fumecheng-7188	299	6	r.	NORP
fumecheng-7188	299	7	2010	DATE
fumecheng-7188	299	8	warszawa	PERSON
fumecheng-7188	299	9	polish	NORP
fumecheng-7188	300	1	32	CARDINAL
fumecheng-7188	301	1	messinis	ORG
fumecheng-7188	301	2	s.	GPE
fumecheng-7188	301	3	g.c.	GPE
fumecheng-7188	301	4	2020	DATE
fumecheng-7188	301	5	1(1	CARDINAL
fumecheng-7188	302	1	77-92	CARDINAL