id	sid	eid	entity	type
fumecheng-7355	2	1	19	CARDINAL
fumecheng-7355	2	2	2021	DATE
fumecheng-7355	3	1	175 185	CARDINAL
fumecheng-7355	3	2	2021	CARDINAL
fumecheng-7355	3	3	university of niš	ORG
fumecheng-7355	3	4	serbia	GPE
fumecheng-7355	3	5	nc	GPE
fumecheng-7355	3	6	valentin l. popov1,2	PERSON
fumecheng-7355	3	7	iakov a. lyashenko1,3	PERSON
fumecheng-7355	3	8	starcevic1,2 1technische	ORG
fumecheng-7355	3	9	universität	GPE
fumecheng-7355	3	10	berlin	GPE
fumecheng-7355	3	11	germany	GPE
fumecheng-7355	3	12	2national	CARDINAL
fumecheng-7355	3	13	tomsk state university	ORG
fumecheng-7355	3	14	russia	GPE
fumecheng-7355	3	15	3sumy	CARDINAL
fumecheng-7355	3	16	state university	ORG
fumecheng-7355	3	17	ukraine	GPE
fumecheng-7355	7	1	two	CARDINAL
fumecheng-7355	9	1	1	CARDINAL
fumecheng-7355	9	2	1	CARDINAL
fumecheng-7355	9	3	2	CARDINAL
fumecheng-7355	10	1	3	CARDINAL
fumecheng-7355	12	1	4	CARDINAL
fumecheng-7355	14	1	5	CARDINAL
fumecheng-7355	14	2	6	CARDINAL
fumecheng-7355	15	1	7	CARDINAL
fumecheng-7355	17	1	5	CARDINAL
fumecheng-7355	17	2	december 21, 2020	DATE
fumecheng-7355	17	3	january 20	DATE
fumecheng-7355	17	4	2021	CARDINAL
fumecheng-7355	17	5	valentin l. popov	PERSON
fumecheng-7355	17	6	technische universität berlin	ORG
fumecheng-7355	18	1	c8-4	ORG
fumecheng-7355	18	2	straße des 17	ORG
fumecheng-7355	19	1	juni 135	DATE
fumecheng-7355	19	2	v.popov@tu-berlin.de	DATE
fumecheng-7355	19	3	176	CARDINAL
fumecheng-7355	19	4	popov	PERSON
fumecheng-7355	19	5	i.a.	GPE
fumecheng-7355	19	6	j. starcevic	PERSON
fumecheng-7355	24	1	8	CARDINAL
fumecheng-7355	24	2	two	CARDINAL
fumecheng-7355	24	3	0.02	CARDINAL
fumecheng-7355	24	4	2 mm	QUANTITY
fumecheng-7355	24	5	11	CARDINAL
fumecheng-7355	25	1	6	CARDINAL
fumecheng-7355	25	2	10	CARDINAL
fumecheng-7355	26	1	two	CARDINAL
fumecheng-7355	27	1	one	CARDINAL
fumecheng-7355	27	2	12	CARDINAL
fumecheng-7355	28	1	2.	CARDINAL
fumecheng-7355	29	1	fig	ORG
fumecheng-7355	30	1	1	CARDINAL
fumecheng-7355	30	2	two	CARDINAL
fumecheng-7355	30	3	1	CARDINAL
fumecheng-7355	32	1	π/2	PERSON
fumecheng-7355	35	1	4	CARDINAL
fumecheng-7355	37	1	1	CARDINAL
fumecheng-7355	37	2	177	CARDINAL
fumecheng-7355	41	1	2	CARDINAL
fumecheng-7355	42	1	2	CARDINAL
fumecheng-7355	43	1	0 1 2(cos	MONEY
fumecheng-7355	44	1	2	CARDINAL
fumecheng-7355	44	2	4	CARDINAL
fumecheng-7355	45	1	3	CARDINAL
fumecheng-7355	45	2	1	CARDINAL
fumecheng-7355	45	3	1	DATE
fumecheng-7355	45	4	1coss	CARDINAL
fumecheng-7355	46	1	3	CARDINAL
fumecheng-7355	46	2	2	DATE
fumecheng-7355	46	3	2	DATE
fumecheng-7355	46	4	2coss	CARDINAL
fumecheng-7355	47	1	4	CARDINAL
fumecheng-7355	47	2	1	CARDINAL
fumecheng-7355	47	3	1	DATE
fumecheng-7355	47	4	1cos	CARDINAL
fumecheng-7355	47	5		DATE
fumecheng-7355	48	1	5	CARDINAL
fumecheng-7355	48	2	2	DATE
fumecheng-7355	48	3	2	DATE
fumecheng-7355	48	4	2cos	CARDINAL
fumecheng-7355	48	5		DATE
fumecheng-7355	49	1	6	CARDINAL
fumecheng-7355	50	1	3	CARDINAL
fumecheng-7355	51	1	γ1,s	DATE
fumecheng-7355	51	2	first	ORDINAL
fumecheng-7355	52	1	second	ORDINAL
fumecheng-7355	53	1	eqs	CARDINAL
fumecheng-7355	54	1	5	CARDINAL
fumecheng-7355	54	2	6	CARDINAL
fumecheng-7355	55	1	13	CARDINAL
fumecheng-7355	56	1	178	CARDINAL
fumecheng-7355	56	2	i.a.	GPE
fumecheng-7355	56	3	j. starcevic	PERSON
fumecheng-7355	56	4	1	CARDINAL
fumecheng-7355	57	1	second	ORDINAL
fumecheng-7355	59	1	3	CARDINAL
fumecheng-7355	59	2	the form 1, 1	DATE
fumecheng-7355	59	3	1coss	CARDINAL
fumecheng-7355	60	1	7	CARDINAL
fumecheng-7355	64	1	7	CARDINAL
fumecheng-7355	64	2	1	CARDINAL
fumecheng-7355	64	3	1	DATE
fumecheng-7355	64	4		DATE
fumecheng-7355	67	1	8)	CARDINAL
fumecheng-7355	67	2	eqs	CARDINAL
fumecheng-7355	68	1	1	CARDINAL
fumecheng-7355	68	2	6	CARDINAL
fumecheng-7355	69	1	2	CARDINAL
fumecheng-7355	69	2	1	CARDINAL
fumecheng-7355	69	3	2	DATE
fumecheng-7355	69	4	1	DATE
fumecheng-7355	70	1		DATE
fumecheng-7355	77	1	9	CARDINAL
fumecheng-7355	77	2	1	CARDINAL
fumecheng-7355	77	3	2	DATE
fumecheng-7355	77	4	1	DATE
fumecheng-7355	77	5	2,s	CARDINAL
fumecheng-7355	77	6		DATE
fumecheng-7355	79	1	7	CARDINAL
fumecheng-7355	80	1	9	CARDINAL
fumecheng-7355	80	2	π/2	PERSON
fumecheng-7355	81	1	3.	CARDINAL
fumecheng-7355	82	1	two	CARDINAL
fumecheng-7355	84	1	13	CARDINAL
fumecheng-7355	89	1	4	CARDINAL
fumecheng-7355	92	1	9	CARDINAL
fumecheng-7355	95	1	10	CARDINAL
fumecheng-7355	96	1	11	CARDINAL
fumecheng-7355	98	1	eqs	ORG
fumecheng-7355	98	2	10	CARDINAL
fumecheng-7355	98	3	179	CARDINAL
fumecheng-7355	98	4	11	CARDINAL
fumecheng-7355	99	1	4b	CARDINAL
fumecheng-7355	101	1	2	CARDINAL
fumecheng-7355	102	1	12	CARDINAL
fumecheng-7355	103	1	4	CARDINAL
fumecheng-7355	104	1	zero	CARDINAL
fumecheng-7355	105	1	0,front 0,back 0,front 0,back	PERSON
fumecheng-7355	108	1	13	CARDINAL
fumecheng-7355	109	1	5	CARDINAL
fumecheng-7355	110	1	0 2 2	PERCENT
fumecheng-7355	110	2	14	CARDINAL
fumecheng-7355	110	3	first	ORDINAL
fumecheng-7355	110	4	04f	DATE
fumecheng-7355	111	1	15	CARDINAL
fumecheng-7355	111	2	180	CARDINAL
fumecheng-7355	111	3	popov	PERSON
fumecheng-7355	111	4	i.a.	GPE
fumecheng-7355	111	5	j. starcevic 4	PERSON
fumecheng-7355	114	1	5a	CARDINAL
fumecheng-7355	117	1	16	CARDINAL
fumecheng-7355	118	1	5	CARDINAL
fumecheng-7355	118	2	eqs	ORG
fumecheng-7355	119	1	12	CARDINAL
fumecheng-7355	119	2	2	CARDINAL
fumecheng-7355	120	1	17	CARDINAL
fumecheng-7355	121	1	5b	CARDINAL
fumecheng-7355	123	1	02f	DATE
fumecheng-7355	124	1	f=	GPE
fumecheng-7355	125	1	5	CARDINAL
fumecheng-7355	126	1	6	CARDINAL
fumecheng-7355	126	2	m-403.2dg	NORP
fumecheng-7355	128	1	80	CARDINAL
fumecheng-7355	128	2	181	CARDINAL
fumecheng-7355	128	3	1600	CARDINAL
fumecheng-7355	128	4	1200	CARDINAL
fumecheng-7355	131	1	first	ORDINAL
fumecheng-7355	132	1	10 µm/s.	MONEY
fumecheng-7355	133	1	indenter	PERSON
fumecheng-7355	133	2	10 µm/s	MONEY
fumecheng-7355	133	3	10 mm	QUANTITY
fumecheng-7355	135	1	0 mm	PERSON
fumecheng-7355	136	1	3.5%	PERCENT
fumecheng-7355	138	1	two	CARDINAL
fumecheng-7355	138	2	100 mm	QUANTITY
fumecheng-7355	138	3	33 mm	QUANTITY
fumecheng-7355	140	1	15	CARDINAL
fumecheng-7355	140	2	33 mm	QUANTITY
fumecheng-7355	140	3	40	CARDINAL
fumecheng-7355	140	4	mn	GPE
fumecheng-7355	140	5	100 mm	QUANTITY
fumecheng-7355	140	6	fig	PERSON
fumecheng-7355	141	1	6	CARDINAL
fumecheng-7355	141	2	14	CARDINAL
fumecheng-7355	141	3	15	CARDINAL
fumecheng-7355	142	1	5	CARDINAL
fumecheng-7355	143	1	first	ORDINAL
fumecheng-7355	144	1	three	CARDINAL
fumecheng-7355	145	1	82	CARDINAL
fumecheng-7355	145	2	201	CARDINAL
fumecheng-7355	145	3	425	CARDINAL
fumecheng-7355	146	1	the last (fifth	DATE
fumecheng-7355	146	2	182	CARDINAL
fumecheng-7355	146	3	popov	PERSON
fumecheng-7355	146	4	i.a.	GPE
fumecheng-7355	146	5	j. starcevic	PERSON
fumecheng-7355	147	1	fifth	ORDINAL
fumecheng-7355	148	1	33 mm	QUANTITY
fumecheng-7355	148	2	33 mm	QUANTITY
fumecheng-7355	150	1	fig	PERSON
fumecheng-7355	151	1	7	CARDINAL
fumecheng-7355	151	2	five	CARDINAL
fumecheng-7355	152	1	three	CARDINAL
fumecheng-7355	153	1	first	ORDINAL
fumecheng-7355	154	1	first	ORDINAL
fumecheng-7355	154	2	second	ORDINAL
fumecheng-7355	155	1	second	ORDINAL
fumecheng-7355	156	1	third	ORDINAL
fumecheng-7355	158	1	7b	CARDINAL
fumecheng-7355	158	2	almost zero	CARDINAL
fumecheng-7355	162	1	second	ORDINAL
fumecheng-7355	164	1	7a	CARDINAL
fumecheng-7355	168	1	7	CARDINAL
fumecheng-7355	168	2	33 mm	QUANTITY
fumecheng-7355	169	1	8	CARDINAL
fumecheng-7355	170	1	fig.	DATE
fumecheng-7355	171	1	8	CARDINAL
fumecheng-7355	172	1	fig	ORG
fumecheng-7355	172	2	8	CARDINAL
fumecheng-7355	172	3	183 moments	QUANTITY
fumecheng-7355	174	1	fig.	DATE
fumecheng-7355	175	1	4	CARDINAL
fumecheng-7355	178	1	fig	PERSON
fumecheng-7355	179	1	8	CARDINAL
fumecheng-7355	180	1	first	ORDINAL
fumecheng-7355	183	1	16	CARDINAL
fumecheng-7355	183	2	17	CARDINAL
fumecheng-7355	188	1	8	CARDINAL
fumecheng-7355	189	1	first	ORDINAL
fumecheng-7355	193	1	184	CARDINAL
fumecheng-7355	193	2	i.a.	GPE
fumecheng-7355	193	3	j. starcevic	PERSON
fumecheng-7355	194	1	16	CARDINAL
fumecheng-7355	194	2	5	CARDINAL
fumecheng-7355	194	3	33 mm	QUANTITY
fumecheng-7355	195	1	17	CARDINAL
fumecheng-7355	195	2	100 mm	QUANTITY
fumecheng-7355	198	1	100 mm	QUANTITY
fumecheng-7355	199	1	fig.	DATE
fumecheng-7355	200	1	8	CARDINAL
fumecheng-7355	201	1	16	CARDINAL
fumecheng-7355	201	2	17	CARDINAL
fumecheng-7355	202	1	6	CARDINAL
fumecheng-7355	204	1	two	CARDINAL
fumecheng-7355	208	1	one	CARDINAL
fumecheng-7355	210	1	the tomsk state university competitiveness improvement program	ORG
fumecheng-7355	210	2	deutsche forschungsgemeinschaft	ORG
fumecheng-7355	211	1	one	CARDINAL
fumecheng-7355	212	1	1	CARDINAL
fumecheng-7355	213	1	bowden, f. p.	PERSON
fumecheng-7355	213	2	tabor	GPE
fumecheng-7355	213	3	2001	DATE
fumecheng-7355	213	4	clarendon	GPE
fumecheng-7355	214	1	2	CARDINAL
fumecheng-7355	214	2	popova	GPE
fumecheng-7355	214	3	e., popov	PERSON
fumecheng-7355	214	4	v.l.	GPE
fumecheng-7355	214	5	2015	DATE
fumecheng-7355	214	6	3(2	CARDINAL
fumecheng-7355	215	1	183	CARDINAL
fumecheng-7355	216	1	3	CARDINAL
fumecheng-7355	216	2	persson	ORG
fumecheng-7355	216	3	b.n.j	GPE
fumecheng-7355	216	4	2002	DATE
fumecheng-7355	218	1	popov	PERSON
fumecheng-7355	218	2	v.l.	GPE
fumecheng-7355	218	3	2017	DATE
fumecheng-7355	219	1	2nd	ORDINAL
fumecheng-7355	219	2	berlin	GPE
fumecheng-7355	220	1	5	CARDINAL
fumecheng-7355	220	2	semprebon	ORG
fumecheng-7355	220	3	h.	PERSON
fumecheng-7355	220	4	2017	DATE
fumecheng-7355	221	1	101	CARDINAL
fumecheng-7355	222	1	6	CARDINAL
fumecheng-7355	223	1	gao	PERSON
fumecheng-7355	223	2	l.	PERSON
fumecheng-7355	223	3	mccarthy	PERSON
fumecheng-7355	223	4	t.j.	GPE
fumecheng-7355	223	5	2006	DATE
fumecheng-7355	223	6	langmuir	PERSON
fumecheng-7355	223	7	22	DATE
fumecheng-7355	224	1	6234-6237	DATE
fumecheng-7355	225	1	junchao	PERSON
fumecheng-7355	225	2	w.	PERSON
fumecheng-7355	225	3	wu	PERSON
fumecheng-7355	225	4	li	PERSON
fumecheng-7355	225	5	g.	PERSON
fumecheng-7355	225	6	2020	DATE
fumecheng-7355	225	7	298	CARDINAL
fumecheng-7355	226	1	1107-1112	DATE
fumecheng-7355	227	1	8	CARDINAL
fumecheng-7355	227	2	shia	NORP
fumecheng-7355	227	3	z.	PERSON
fumecheng-7355	227	4	liu	PERSON
fumecheng-7355	227	5	gan	PERSON
fumecheng-7355	227	6	2018	DATE
fumecheng-7355	227	7	555	CARDINAL
fumecheng-7355	228	1	365-371	CARDINAL
fumecheng-7355	228	2	185 9	DATE
fumecheng-7355	229	1	heib	ORG
fumecheng-7355	229	2	f.	PERSON
fumecheng-7355	229	3	schmitt	PERSON
fumecheng-7355	229	4	m.	PERSON
fumecheng-7355	229	5	2016	DATE
fumecheng-7355	229	6	hpdsa	PERSON
fumecheng-7355	229	7	6(4	CARDINAL
fumecheng-7355	229	8	57	DATE
fumecheng-7355	230	1	10	CARDINAL
fumecheng-7355	230	2	wu	PERSON
fumecheng-7355	230	3	li	PERSON
fumecheng-7355	230	4	woon, w.-y.	ORG
fumecheng-7355	230	5	sheng	PERSON
fumecheng-7355	230	6	2016	DATE
fumecheng-7355	230	7	385	CARDINAL
fumecheng-7355	231	1	153-161	CARDINAL
fumecheng-7355	232	1	11	CARDINAL
fumecheng-7355	233	1	hubbe	GPE
fumecheng-7355	233	2	m.a.	GPE
fumecheng-7355	233	3	gardner	PERSON
fumecheng-7355	233	4	d.j.	GPE
fumecheng-7355	233	5	shen	GPE
fumecheng-7355	233	6	w.	PERSON
fumecheng-7355	233	7	2015	DATE
fumecheng-7355	233	8	8657-8749	DATE
fumecheng-7355	234	1	12	CARDINAL
fumecheng-7355	235	1	popov	PERSON
fumecheng-7355	235	2	v.l.	GPE
fumecheng-7355	235	3	2020	DATE
fumecheng-7355	235	4	http://arxiv.org/abs/2012.13979 13	DATE
fumecheng-7355	236	1	popov	PERSON
fumecheng-7355	236	2	v.l.	GPE
fumecheng-7355	237	1	popov	PERSON
fumecheng-7355	237	2	2021	DATE
fumecheng-7355	237	3	473-483	CARDINAL
fumecheng-7355	237	4	14	CARDINAL
fumecheng-7355	237	5	i.a.	GPE
fumecheng-7355	237	6	r.	NORP
fumecheng-7355	237	7	2020	DATE
fumecheng-7355	238	1	6	CARDINAL
fumecheng-7355	238	2	49	DATE
fumecheng-7355	239	1	15	CARDINAL
fumecheng-7355	239	2	lyashenko	PERSON
fumecheng-7355	239	3	i.a.	GPE
fumecheng-7355	239	4	popov	PERSON
fumecheng-7355	239	5	v.l.	GPE
fumecheng-7355	239	6	2020	DATE
fumecheng-7355	240	1	1695-1707	DATE
fumecheng-7355	241	1	16	CARDINAL
fumecheng-7355	242	1	popov	PERSON
fumecheng-7355	242	2	v.l.	GPE
fumecheng-7355	242	3	lyashenko	PERSON
fumecheng-7355	242	4	i.a.	GPE
fumecheng-7355	242	5	j.	PERSON
fumecheng-7355	242	6	2021	DATE
fumecheng-7355	242	7	indenter r=33mm	PERSON
fumecheng-7355	244	1	2.13032.49923 17	DATE
fumecheng-7355	245	1	popov	PERSON
fumecheng-7355	245	2	v.l.	GPE
fumecheng-7355	245	3	lyashenko	PERSON
fumecheng-7355	245	4	i.a.	GPE
fumecheng-7355	245	5	j.	PERSON
fumecheng-7355	245	6	2021	DATE
fumecheng-7355	246	1	https://doi.org/10.13140/rg	PERSON