id	sid	eid	entity	type
fumecheng-7383	1	1	7383	CARDINAL
fumecheng-7383	2	1	19	CARDINAL
fumecheng-7383	2	2	2021	DATE
fumecheng-7383	3	1	39 49	CARDINAL
fumecheng-7383	3	2	2021	CARDINAL
fumecheng-7383	3	3	university of niš	ORG
fumecheng-7383	3	4	serbia	GPE
fumecheng-7383	3	5	nc	GPE
fumecheng-7383	3	6	fabian	NORP
fumecheng-7383	3	7	markus heß department	ORG
fumecheng-7383	3	8	tu berlin	GPE
fumecheng-7383	3	9	germany	GPE
fumecheng-7383	11	1	1	CARDINAL
fumecheng-7383	14	1	1	CARDINAL
fumecheng-7383	14	2	2	CARDINAL
fumecheng-7383	15	1	3	CARDINAL
fumecheng-7383	15	2	january 05	DATE
fumecheng-7383	15	3	2021	DATE
fumecheng-7383	15	4	february 04	DATE
fumecheng-7383	15	5	2021	CARDINAL
fumecheng-7383	15	6	fabian	NORP
fumecheng-7383	15	7	berlin university of technology	ORG
fumecheng-7383	16	1	c8-4	ORG
fumecheng-7383	16	2	straße des 17	ORG
fumecheng-7383	17	1	juni 135, 10623	DATE
fumecheng-7383	17	2	berlin	GPE
fumecheng-7383	17	3	germany e	GPE
fumecheng-7383	17	4	40	CARDINAL
fumecheng-7383	17	5	f. forsbach	PERSON
fumecheng-7383	17	6	m. heß	PERSON
fumecheng-7383	17	7	today	DATE
fumecheng-7383	18	1	one	CARDINAL
fumecheng-7383	21	1	4	CARDINAL
fumecheng-7383	21	2	5	CARDINAL
fumecheng-7383	23	1	the last decade	DATE
fumecheng-7383	23	2	6	CARDINAL
fumecheng-7383	23	3	7	DATE
fumecheng-7383	23	4	8	CARDINAL
fumecheng-7383	25	1	ridge	PERSON
fumecheng-7383	26	1	9	CARDINAL
fumecheng-7383	27	1	10	CARDINAL
fumecheng-7383	31	1	three	CARDINAL
fumecheng-7383	32	1	shultz et al	PERSON
fumecheng-7383	33	1	8	CARDINAL
fumecheng-7383	34	1	chapter 2	LAW
fumecheng-7383	34	2	first	ORDINAL
fumecheng-7383	36	1	chapter 3	LAW
fumecheng-7383	38	1	chapter 4	LAW
fumecheng-7383	41	1	chapter 5	LAW
fumecheng-7383	42	1	41 2	CARDINAL
fumecheng-7383	42	2	1	CARDINAL
fumecheng-7383	44	1	10	CARDINAL
fumecheng-7383	46	1	11	CARDINAL
fumecheng-7383	49	1	1	CARDINAL
fumecheng-7383	50	1	1	CARDINAL
fumecheng-7383	50	2	12	CARDINAL
fumecheng-7383	52	1	𝜎el	ORG
fumecheng-7383	52	2	2 2el	DATE
fumecheng-7383	52	3	2	CARDINAL
fumecheng-7383	52	4		GPE
fumecheng-7383	52	5	2	CARDINAL
fumecheng-7383	53	1	13	CARDINAL
fumecheng-7383	53	2	10	CARDINAL
fumecheng-7383	54	1	1	CARDINAL
fumecheng-7383	54	2	2	CARDINAL
fumecheng-7383	54	3	2(	PERCENT
fumecheng-7383	56	1	3	CARDINAL
fumecheng-7383	57	1	shull	ORG
fumecheng-7383	57	2	42	CARDINAL
fumecheng-7383	57	3	m. heß	PERSON
fumecheng-7383	57	4	2 1/ 1/	CARDINAL
fumecheng-7383	57	5	1/	CARDINAL
fumecheng-7383	57	6	r,0 r,0	ORG
fumecheng-7383	57	7	1 1/	CARDINAL
fumecheng-7383	57	8	 	PERSON
fumecheng-7383	59	1	4	CARDINAL
fumecheng-7383	59	2	1 1	DATE
fumecheng-7383	59	3	5	CARDINAL
fumecheng-7383	59	4	1 1	DATE
fumecheng-7383	59	5	6	CARDINAL
fumecheng-7383	59	6	w	ORG
fumecheng-7383	59	7	10	CARDINAL
fumecheng-7383	60	1	eqs	ORG
fumecheng-7383	61	1	5	CARDINAL
fumecheng-7383	61	2	6	CARDINAL
fumecheng-7383	61	3	section 3.4	LAW
fumecheng-7383	61	4	1	CARDINAL
fumecheng-7383	62	1	popov	PERSON
fumecheng-7383	62	2	14	CARDINAL
fumecheng-7383	63	1	7	CARDINAL
fumecheng-7383	63	2	eqs	ORG
fumecheng-7383	64	1	1	CARDINAL
fumecheng-7383	64	2	7	CARDINAL
fumecheng-7383	64	3	10	CARDINAL
fumecheng-7383	66	1	1	CARDINAL
fumecheng-7383	67	1	0	CARDINAL
fumecheng-7383	68	1	u tu t = 	PERSON
fumecheng-7383	68	2		ORG
fumecheng-7383	68	3	1 x x x	QUANTITY
fumecheng-7383	69	1	9	CARDINAL
fumecheng-7383	71	1	1	CARDINAL
fumecheng-7383	72	1	10	CARDINAL
fumecheng-7383	74	1	+ + (11	DATE
fumecheng-7383	75	1	9	CARDINAL
fumecheng-7383	75	2	2 2	CARDINAL
fumecheng-7383	75	3	0	CARDINAL
fumecheng-7383	76	1	2	CARDINAL
fumecheng-7383	78	1	2 2	CARDINAL
fumecheng-7383	78	2	2	CARDINAL
fumecheng-7383	79	1		GPE
fumecheng-7383	82	1		NORP
fumecheng-7383	82	2		GPE
fumecheng-7383	84	1		GPE
fumecheng-7383	85	1	12	CARDINAL
fumecheng-7383	85	2	electroadhesion 43	LAW
fumecheng-7383	88	1	2	CARDINAL
fumecheng-7383	88	2	2 2	CARDINAL
fumecheng-7383	88	3	2	CARDINAL
fumecheng-7383	88	4	arctan	GPE
fumecheng-7383	89	1	1 1 1 1 1 1	QUANTITY
fumecheng-7383	93	1	=	CARDINAL
fumecheng-7383	94	1	13	CARDINAL
fumecheng-7383	95	1		GPE
fumecheng-7383	95	2	14	CARDINAL
fumecheng-7383	98	1	sc	GPE
fumecheng-7383	102	1		GPE
fumecheng-7383	103	1	15	CARDINAL
fumecheng-7383	103	2	10	CARDINAL
fumecheng-7383	104	1	3	CARDINAL
fumecheng-7383	104	2	1	CARDINAL
fumecheng-7383	105	1	three	CARDINAL
fumecheng-7383	105	2		ORG
fumecheng-7383	105	3	0	PRODUCT
fumecheng-7383	106	1		NORP
fumecheng-7383	106	2	16	CARDINAL
fumecheng-7383	108	1	2	CARDINAL
fumecheng-7383	108	2	17	CARDINAL
fumecheng-7383	108	3	f. forsbach	PERSON
fumecheng-7383	108	4	m. heß 3.1	PERSON
fumecheng-7383	109	1	3	CARDINAL
fumecheng-7383	109	2	3	CARDINAL
fumecheng-7383	109	3	1µm	QUANTITY
fumecheng-7383	109	4	3.9	CARDINAL
fumecheng-7383	109	5	2	CARDINAL
fumecheng-7383	110	1	sio2	ORG
fumecheng-7383	110	2	6	CARDINAL
fumecheng-7383	111	1	15	CARDINAL
fumecheng-7383	111	2	3	CARDINAL
fumecheng-7383	112	1	15	CARDINAL
fumecheng-7383	113	1	1	CARDINAL
fumecheng-7383	113	2	3.2	CARDINAL
fumecheng-7383	114	1	sc sc sc	ORG
fumecheng-7383	115	1	17	CARDINAL
fumecheng-7383	116	1	200-450 µm	QUANTITY
fumecheng-7383	116	2	16	CARDINAL
fumecheng-7383	118	1	17	CARDINAL
fumecheng-7383	120	1	2	CARDINAL
fumecheng-7383	120	2	3 3	DATE
fumecheng-7383	120	3	9 10 mz z z	QUANTITY
fumecheng-7383	122	1	18	CARDINAL
fumecheng-7383	122	2	5	CARDINAL
fumecheng-7383	122	3	4 8	DATE
fumecheng-7383	123	1	59 10	DATE
fumecheng-7383	126	1	19	CARDINAL
fumecheng-7383	128	1	1	CARDINAL
fumecheng-7383	128	2	0.3	CARDINAL
fumecheng-7383	129	1	3	CARDINAL
fumecheng-7383	129	2	3.9	CARDINAL
fumecheng-7383	129	3	1	CARDINAL
fumecheng-7383	129	4	8.854 ⋅ 10−12	MONEY
fumecheng-7383	129	5	3m	QUANTITY
fumecheng-7383	129	6	1 µm da	QUANTITY
fumecheng-7383	129	7	3.5	CARDINAL
fumecheng-7383	129	8	350	CARDINAL
fumecheng-7383	129	9	1	CARDINAL
fumecheng-7383	129	10	106	CARDINAL
fumecheng-7383	129	11	𝛺 ri	GPE
fumecheng-7383	129	12	3	CARDINAL
fumecheng-7383	129	13	2	CARDINAL
fumecheng-7383	129	14	105	CARDINAL
fumecheng-7383	129	15	5000 mm4/n2	QUANTITY
fumecheng-7383	129	16	45 3.3	CARDINAL
fumecheng-7383	131	1	8	CARDINAL
fumecheng-7383	131	2	1-5	CARDINAL
fumecheng-7383	132	1	18	CARDINAL
fumecheng-7383	136	1	8	CARDINAL
fumecheng-7383	136	2	7 m𝛺	PERCENT
fumecheng-7383	137	1	3.4	CARDINAL
fumecheng-7383	137	2	ridge	PERSON
fumecheng-7383	138	1	eqs	ORG
fumecheng-7383	138	2	5	CARDINAL
fumecheng-7383	138	3	6	CARDINAL
fumecheng-7383	138	4	1	CARDINAL
fumecheng-7383	138	5	19	CARDINAL
fumecheng-7383	139	1	approximately 37	CARDINAL
fumecheng-7383	141	1	eqs	ORG
fumecheng-7383	142	1	5	CARDINAL
fumecheng-7383	142	2	6	CARDINAL
fumecheng-7383	143	1	10	CARDINAL
fumecheng-7383	144	1	4	CARDINAL
fumecheng-7383	144	2	6	CARDINAL
fumecheng-7383	145	1	ridge	PERSON
fumecheng-7383	147	1	3	CARDINAL
fumecheng-7383	147	2	6	CARDINAL
fumecheng-7383	148	1	1	CARDINAL
fumecheng-7383	151	1	14	CARDINAL
fumecheng-7383	152	1	2	CARDINAL
fumecheng-7383	153	1	2	CARDINAL
fumecheng-7383	154	1	higher than 2000	CARDINAL
fumecheng-7383	155	1	15	CARDINAL
fumecheng-7383	157	1	up to 80%	PERCENT
fumecheng-7383	157	2	100	CARDINAL
fumecheng-7383	157	3	10000	CARDINAL
fumecheng-7383	159	1	3	CARDINAL
fumecheng-7383	161	1	20	CARDINAL
fumecheng-7383	161	2	m. heß	PERSON
fumecheng-7383	163	1	fig	ORG
fumecheng-7383	164	1	3	CARDINAL
fumecheng-7383	164	2	140v	ORG
fumecheng-7383	164	3	6	CARDINAL
fumecheng-7383	165	1	3	CARDINAL
fumecheng-7383	167	1	1-2m𝛺	CARDINAL
fumecheng-7383	168	1	15	CARDINAL
fumecheng-7383	169	1	section 3.3	LAW
fumecheng-7383	171	1	3	CARDINAL
fumecheng-7383	172	1	2-5	DATE
fumecheng-7383	172	2	section 3.3	LAW
fumecheng-7383	174	1	12	CARDINAL
fumecheng-7383	174	2	da)-2	GPE
fumecheng-7383	175	1	47	CARDINAL
fumecheng-7383	176	1	3	CARDINAL
fumecheng-7383	181	1	3	CARDINAL
fumecheng-7383	184	1	4shows	PRODUCT
fumecheng-7383	184	2	one	CARDINAL
fumecheng-7383	184	3	5000	CARDINAL
fumecheng-7383	184	4	100	CARDINAL
fumecheng-7383	185	1	1	CARDINAL
fumecheng-7383	186	1	100	CARDINAL
fumecheng-7383	186	2	approximately 60%	PERCENT
fumecheng-7383	187	1	more than 80%	PERCENT
fumecheng-7383	189	1	fig	PERSON
fumecheng-7383	190	1	4	CARDINAL
fumecheng-7383	190	2	200v	CARDINAL
fumecheng-7383	190	3	100hz	ORG
fumecheng-7383	190	4	5000	CARDINAL
fumecheng-7383	191	1	5	CARDINAL
fumecheng-7383	191	2	100	CARDINAL
fumecheng-7383	191	3	5000	CARDINAL
fumecheng-7383	194	1	100	CARDINAL
fumecheng-7383	196	1	48	CARDINAL
fumecheng-7383	196	2	f. forsbach	PERSON
fumecheng-7383	196	3	m. heß fig	PERSON
fumecheng-7383	197	1	5	CARDINAL
fumecheng-7383	197	2	200v	CARDINAL
fumecheng-7383	197	3	100hz	ORG
fumecheng-7383	197	4	5000	CARDINAL
fumecheng-7383	197	5	fn=0.5n 5	DATE
fumecheng-7383	198	1	three	CARDINAL
fumecheng-7383	200	1	6	CARDINAL
fumecheng-7383	205	1	1	CARDINAL
fumecheng-7383	206	1	bau	PERSON
fumecheng-7383	206	2	poupyrev	PERSON
fumecheng-7383	206	3	i.	PERSON
fumecheng-7383	206	4	israr	PERSON
fumecheng-7383	206	5	harrison	PERSON
fumecheng-7383	206	6	2010	DATE
fumecheng-7383	206	7	2010 23rd	DATE
fumecheng-7383	207	1	283	CARDINAL
fumecheng-7383	208	1	2	CARDINAL
fumecheng-7383	208	2	2017	DATE
fumecheng-7383	208	3	10	DATE
fumecheng-7383	209	1	488-499	CARDINAL
fumecheng-7383	210	1	3	CARDINAL
fumecheng-7383	210	2	grimnes	PERSON
fumecheng-7383	210	3	s., 1983	ORG
fumecheng-7383	210	4	acta physiologica scandinavica	ORG
fumecheng-7383	210	5	118	CARDINAL
fumecheng-7383	211	1	19-25	CARDINAL
fumecheng-7383	213	1	liu	PERSON
fumecheng-7383	213	2	x.	GPE
fumecheng-7383	213	3	z., lewis	PERSON
fumecheng-7383	213	4	r.	NORP
fumecheng-7383	213	5	m.j.	GPE
fumecheng-7383	213	6	matcher	PERSON
fumecheng-7383	213	7	s.j.	PERSON
fumecheng-7383	213	8	2013	DATE
fumecheng-7383	213	9	63	DATE
fumecheng-7383	214	1	34-44	DATE
fumecheng-7383	215	1	49 5	DATE
fumecheng-7383	216	1	van kuilenburg	PERSON
fumecheng-7383	216	2	j.v.	GPE
fumecheng-7383	216	3	masen	PERSON
fumecheng-7383	216	4	m.a.	PERSON
fumecheng-7383	216	5	van der heide	PERSON
fumecheng-7383	216	6	e., 2013	DATE
fumecheng-7383	216	7	229	CARDINAL
fumecheng-7383	217	1	243–258	CARDINAL
fumecheng-7383	218	1	6	CARDINAL
fumecheng-7383	218	2	meyer	ORG
fumecheng-7383	218	3	d.j.	GPE
fumecheng-7383	218	4	m.a.	GPE
fumecheng-7383	218	5	colgate	ORG
fumecheng-7383	218	6	j.e.	GPE
fumecheng-7383	218	7	2013	DATE
fumecheng-7383	218	8	2013	DATE
fumecheng-7383	219	1	43	CARDINAL
fumecheng-7383	220	1	7	CARDINAL
fumecheng-7383	220	2	vezzoli	PERSON
fumecheng-7383	220	3	e., amberg	PERSON
fumecheng-7383	220	4	m., giraud, f.	PERSON
fumecheng-7383	220	5	lemaire-semail	ORG
fumecheng-7383	220	6	b.	PERSON
fumecheng-7383	220	7	2014	DATE
fumecheng-7383	221	1	369–376	CARDINAL
fumecheng-7383	222	1	8	CARDINAL
fumecheng-7383	223	1	shultz	ORG
fumecheng-7383	223	2	c.d.	GPE
fumecheng-7383	223	3	m.a.	GPE
fumecheng-7383	223	4	colgate	ORG
fumecheng-7383	223	5	j.e.	PERSON
fumecheng-7383	223	6	2015	DATE
fumecheng-7383	223	7	johnsen	PERSON
fumecheng-7383	224	1	2015	CARDINAL
fumecheng-7383	225	1	57-62	DATE
fumecheng-7383	226	1	9	CARDINAL
fumecheng-7383	226	2	nakamura	PERSON
fumecheng-7383	226	3	t.	GPE
fumecheng-7383	226	4	yamamoto	ORG
fumecheng-7383	226	5	a.	PERSON
fumecheng-7383	226	6	2017	DATE
fumecheng-7383	226	7	robomech journal	ORG
fumecheng-7383	226	8	4	CARDINAL
fumecheng-7383	226	9	18	DATE
fumecheng-7383	226	10	10	CARDINAL
fumecheng-7383	227	1	m.	PERSON
fumecheng-7383	227	2	2020	DATE
fumecheng-7383	227	3	6	CARDINAL
fumecheng-7383	227	4	77	DATE
fumecheng-7383	227	5	11	CARDINAL
fumecheng-7383	228	1	gao	PERSON
fumecheng-7383	228	2	j.	PERSON
fumecheng-7383	228	3	luedtke	GPE
fumecheng-7383	228	4	w.d.	GPE
fumecheng-7383	228	5	gourdon	GPE
fumecheng-7383	228	6	d.	NORP
fumecheng-7383	228	7	ruths	GPE
fumecheng-7383	228	8	m.	PERSON
fumecheng-7383	228	9	j.	PERSON
fumecheng-7383	228	10	2004	DATE
fumecheng-7383	228	11	108	CARDINAL
fumecheng-7383	228	12	3410	CARDINAL
fumecheng-7383	228	13	3425	CARDINAL
fumecheng-7383	229	1	12	CARDINAL
fumecheng-7383	230	1	popov	PERSON
fumecheng-7383	230	2	v.l.	GPE
fumecheng-7383	230	3	a.v.	GPE
fumecheng-7383	230	4	2017	DATE
fumecheng-7383	231	1	1131–1145.	DATE
fumecheng-7383	232	1	13	CARDINAL
fumecheng-7383	233	1	r.	NORP
fumecheng-7383	233	2	g.	PERSON
fumecheng-7383	233	3	c., ben ali	PERSON
fumecheng-7383	233	4	al akhrass	PERSON
fumecheng-7383	233	5	s., guibert	PERSON
fumecheng-7383	233	6	m.	PERSON
fumecheng-7383	233	7	scheibert	PERSON
fumecheng-7383	233	8	j., 2018	ORG
fumecheng-7383	233	9	the national academy of sciences	ORG
fumecheng-7383	233	10	the united states of america	GPE
fumecheng-7383	233	11	115	CARDINAL
fumecheng-7383	234	1	471	CARDINAL
fumecheng-7383	235	1	14	CARDINAL
fumecheng-7383	236	1	m., popov	PERSON
fumecheng-7383	236	2	v.l.	GPE
fumecheng-7383	236	3	2019	DATE
fumecheng-7383	236	4	7(12	CARDINAL
fumecheng-7383	236	5	102	CARDINAL
fumecheng-7383	236	6	15	CARDINAL
fumecheng-7383	237	1	shultz	ORG
fumecheng-7383	237	2	c.d.	GPE
fumecheng-7383	237	3	m.a.	GPE
fumecheng-7383	237	4	colgate	ORG
fumecheng-7383	237	5	j.e.	PERSON
fumecheng-7383	237	6	2018	DATE
fumecheng-7383	238	1	2018	DATE
fumecheng-7383	238	2	ieee haptics	ORG
fumecheng-7383	239	1	151	CARDINAL
fumecheng-7383	240	1	16	CARDINAL
fumecheng-7383	240	2	a.	PERSON
fumecheng-7383	240	3	2000	DATE
fumecheng-7383	240	4	13	DATE
fumecheng-7383	241	1	429–433	CARDINAL
fumecheng-7383	242	1	17	CARDINAL
fumecheng-7383	243	1	yamamoto	ORG
fumecheng-7383	243	2	t.	GPE
fumecheng-7383	243	3	yamamoto	PERSON
fumecheng-7383	243	4	1976	DATE
fumecheng-7383	243	5	medical & biological	ORG
fumecheng-7383	243	6	14	DATE
fumecheng-7383	244	1	494–500	CARDINAL
fumecheng-7383	245	1	18	CARDINAL
fumecheng-7383	245	2	li	PERSON
fumecheng-7383	245	3	x.	GPE
fumecheng-7383	245	4	ma	PERSON
fumecheng-7383	245	5	x.	GPE
fumecheng-7383	245	6	hipwell	ORG
fumecheng-7383	245	7	mary	PERSON
fumecheng-7383	245	8	2021	DATE
fumecheng-7383	245	9	13	DATE
fumecheng-7383	246	1	3303–3310	CARDINAL
fumecheng-7383	246	2	19	CARDINAL
fumecheng-7383	247	1	dzidek	ORG
fumecheng-7383	247	2	b.m.	GPE
fumecheng-7383	247	3	adams	ORG
fumecheng-7383	247	4	m.j.	PERSON
fumecheng-7383	247	5	andrews	GPE
fumecheng-7383	247	6	j.w.	GPE
fumecheng-7383	247	7	zhang, z.	PERSON
fumecheng-7383	247	8	johnson	PERSON
fumecheng-7383	247	9	s.a.	GPE
fumecheng-7383	247	10	2017	DATE
fumecheng-7383	247	11	14, 20160935	DATE
fumecheng-7383	248	1	20	CARDINAL
fumecheng-7383	248	2	vezzoli	ORG
fumecheng-7383	248	3	e., ben messaoud	PERSON
fumecheng-7383	248	4	w.	PERSON
fumecheng-7383	248	5	amberg	PERSON
fumecheng-7383	248	6	m., lemaire-semail	PERSON
fumecheng-7383	248	7	b.	PERSON
fumecheng-7383	248	8	bueno	PERSON
fumecheng-7383	248	9	m.a.	PERSON
fumecheng-7383	248	10	2015	DATE
fumecheng-7383	248	11	european journal	ORG
fumecheng-7383	248	12	17	CARDINAL
fumecheng-7383	249	1	377	CARDINAL