id	sid	eid	entity	type
fumecheng-763	1	1	half	CARDINAL
fumecheng-763	2	1	13	CARDINAL
fumecheng-763	3	1	33	CARDINAL
fumecheng-763	3	2	1experimental	CARDINAL
fumecheng-763	3	3	539	CARDINAL
fumecheng-763	3	4	lars b. voll	PERSON
fumecheng-763	3	5	berlin institute of technology	ORG
fumecheng-763	3	6	germany	GPE
fumecheng-763	10	1	1	CARDINAL
fumecheng-763	11	1	johnson	PERSON
fumecheng-763	11	2	kendall	PERSON
fumecheng-763	11	3	roberts	PERSON
fumecheng-763	12	1	1	CARDINAL
fumecheng-763	14	1	johnson	PERSON
fumecheng-763	14	2	2	CARDINAL
fumecheng-763	17	1	3	CARDINAL
fumecheng-763	18	1	january 09, 2015	DATE
fumecheng-763	18	2	march 2, 2015	DATE
fumecheng-763	19	1	lars b. voll	PERSON
fumecheng-763	19	2	universität berlin	GPE
fumecheng-763	20	1	17	CARDINAL
fumecheng-763	21	1	juni 135, 10623	DATE
fumecheng-763	21	2	berlin	GPE
fumecheng-763	21	3	germany e	GPE
fumecheng-763	21	4	34	CARDINAL
fumecheng-763	22	1	4	CARDINAL
fumecheng-763	22	2	5	CARDINAL
fumecheng-763	24	1	6	CARDINAL
fumecheng-763	29	1	one	CARDINAL
fumecheng-763	29	2	3/2	CARDINAL
fumecheng-763	34	1	two	CARDINAL
fumecheng-763	40	1	5	CARDINAL
fumecheng-763	40	2	8	CARDINAL
fumecheng-763	41	1	9	CARDINAL
fumecheng-763	41	2	10	CARDINAL
fumecheng-763	42	1	11	CARDINAL
fumecheng-763	44	1	12	CARDINAL
fumecheng-763	48	1	2	CARDINAL
fumecheng-763	48	2	2.1	CARDINAL
fumecheng-763	51	1	80 °	QUANTITY
fumecheng-763	52	1	1	CARDINAL
fumecheng-763	53	1	35	CARDINAL
fumecheng-763	54	1	1	CARDINAL
fumecheng-763	54	2	0.1	CARDINAL
fumecheng-763	54	3	50	CARDINAL
fumecheng-763	54	4	1.5 n	QUANTITY
fumecheng-763	69	1	2.2	CARDINAL
fumecheng-763	74	1	2	CARDINAL
fumecheng-763	74	2	3	CARDINAL
fumecheng-763	74	3	36	CARDINAL
fumecheng-763	75	1	4	CARDINAL
fumecheng-763	76	1	o	DATE
fumecheng-763	76	2	0,028	CARDINAL
fumecheng-763	76	3	0,260	CARDINAL
fumecheng-763	76	4	2,730 µm	MONEY
fumecheng-763	77	1	2	CARDINAL
fumecheng-763	78	1	2	CARDINAL
fumecheng-763	79	1	14 mm	QUANTITY
fumecheng-763	81	1	0.01 0.02 0.03 0.04 0.05	QUANTITY
fumecheng-763	81	2	0.07 0.08	CARDINAL
fumecheng-763	81	3	2,730	CARDINAL
fumecheng-763	81	4	0,028	CARDINAL
fumecheng-763	81	5	0,260	CARDINAL
fumecheng-763	82	1	3	CARDINAL
fumecheng-763	83	1	3	CARDINAL
fumecheng-763	85	1	37 3	DATE
fumecheng-763	85	2	4	CARDINAL
fumecheng-763	85	3	5	CARDINAL
fumecheng-763	85	4	two	CARDINAL
fumecheng-763	86	1	6	CARDINAL
fumecheng-763	86	2	4	CARDINAL
fumecheng-763	87	1	1	CARDINAL
fumecheng-763	90	1	2	CARDINAL
fumecheng-763	91	1	1	CARDINAL
fumecheng-763	91	2	3	CARDINAL
fumecheng-763	93	1	9	CARDINAL
fumecheng-763	95	1	4	CARDINAL
fumecheng-763	97	1	3	CARDINAL
fumecheng-763	97	2	04	CARDINAL
fumecheng-763	98	1	5	CARDINAL
fumecheng-763	99	1	3	CARDINAL
fumecheng-763	99	2	4	CARDINAL
fumecheng-763	99	3	5	CARDINAL
fumecheng-763	101	1	2	CARDINAL
fumecheng-763	102	1	4	CARDINAL
fumecheng-763	102	2	5	CARDINAL
fumecheng-763	103	1	first	ORDINAL
fumecheng-763	106	1	3	CARDINAL
fumecheng-763	106	2	0	CARDINAL
fumecheng-763	107	1	38	CARDINAL
fumecheng-763	107	2	voll	ORG
fumecheng-763	107	3	0.006 mm	QUANTITY
fumecheng-763	108	1	2	CARDINAL
fumecheng-763	108	2	0	CARDINAL
fumecheng-763	110	1	4.	CARDINAL
fumecheng-763	117	1	popov	PERSON
fumecheng-763	117	2	m. popov	PERSON
fumecheng-763	117	3	r. heise	PERSON
fumecheng-763	118	1	1	CARDINAL
fumecheng-763	119	1	johnson	PERSON
fumecheng-763	119	2	k.l, kendall	ORG
fumecheng-763	119	3	k., roberts	PERSON
fumecheng-763	119	4	a. d.	PERSON
fumecheng-763	119	5	1971	DATE
fumecheng-763	120	1	r. soc	PERSON
fumecheng-763	121	1	lond	PERSON
fumecheng-763	123	1	301–313	CARDINAL
fumecheng-763	124	1	2	CARDINAL
fumecheng-763	124	2	johnson	PERSON
fumecheng-763	124	3	k.l.	GPE
fumecheng-763	124	4	2003	DATE
fumecheng-763	124	5	cambridge university press	ORG
fumecheng-763	125	1	3	CARDINAL
fumecheng-763	125	2	d.	NORP
fumecheng-763	125	3	m., 1978	PERSON
fumecheng-763	126	1	journal of physics	ORG
fumecheng-763	127	1	11(14	CARDINAL
fumecheng-763	127	2	1989-2023	DATE
fumecheng-763	128	1	4	CARDINAL
fumecheng-763	128	2	popov	PERSON
fumecheng-763	128	3	v. l., 2012	PERSON
fumecheng-763	128	4	15(5-6	CARDINAL
fumecheng-763	129	1	254	CARDINAL
fumecheng-763	130	1	5	CARDINAL
fumecheng-763	130	2	popov	PERSON
fumecheng-763	130	3	v.l.	GPE
fumecheng-763	130	4	hess	PERSON
fumecheng-763	130	5	m.	PERSON
fumecheng-763	130	6	2015	DATE
fumecheng-763	131	1	voll	NORP
fumecheng-763	131	2	l.b.	GPE
fumecheng-763	131	3	popov	PERSON
fumecheng-763	131	4	v.l.	GPE
fumecheng-763	131	5	2014	DATE
fumecheng-763	131	6	17(3	CARDINAL
fumecheng-763	132	1	232	CARDINAL
fumecheng-763	133	1	7	CARDINAL
fumecheng-763	134	1	popov	PERSON
fumecheng-763	134	2	v.l.	GPE
fumecheng-763	134	3	2010	DATE
fumecheng-763	136	1	hess	PERSON
fumecheng-763	136	2	m., 2012	PERSON
fumecheng-763	136	3	15	DATE
fumecheng-763	137	1	264-269	CARDINAL
fumecheng-763	137	2	9	CARDINAL
fumecheng-763	137	3	kürschner	PERSON
fumecheng-763	137	4	s.	PERSON
fumecheng-763	137	5	popov	PERSON
fumecheng-763	137	6	v.l.	GPE
fumecheng-763	137	7	2013	DATE
fumecheng-763	139	1	e	PERSON
fumecheng-763	139	2	87, 042802	DATE
fumecheng-763	140	1	10	CARDINAL
fumecheng-763	140	2	v.n.	GPE
fumecheng-763	140	3	sivebaek	PERSON
fumecheng-763	140	4	i. m.	PERSON
fumecheng-763	140	5	persson	GPE
fumecheng-763	140	6	b.n.j	GPE
fumecheng-763	140	7	2004	DATE
fumecheng-763	140	8	j. chem	ORG
fumecheng-763	141	1	phys.	ORG
fumecheng-763	141	2	121(19	DATE
fumecheng-763	142	1	9639-9647	DATE
fumecheng-763	143	1	11	CARDINAL
fumecheng-763	144	1	heise	ORG
fumecheng-763	144	2	r.	NORP
fumecheng-763	144	3	popov	PERSON
fumecheng-763	144	4	v.l.	GPE
fumecheng-763	144	5	2010	DATE
fumecheng-763	145	1	lett.	PERSON
fumecheng-763	145	2	247-250	CARDINAL
fumecheng-763	145	3	10.1007	CARDINAL
fumecheng-763	145	4	010-9617	CARDINAL
fumecheng-763	145	5	12	CARDINAL
fumecheng-763	146	1	andrade	PERSON
fumecheng-763	146	2	e.n. da c., 1934	PERSON
fumecheng-763	146	3	london	GPE
fumecheng-763	149	1	mag	PERSON
fumecheng-763	150	1	j. sci.	PERSON
fumecheng-763	150	2	17(112	CARDINAL
fumecheng-763	151	1	497–511	CARDINAL