id	sid	tid	token	lemma	pos
fumecheng-13732	1	1	13732	13732	NUM
fumecheng-13732	1	2	facta	facta	PROPN
fumecheng-13732	1	3	universitatis	universitatis	PROPN
fumecheng-13732	1	4	series	series	NOUN
fumecheng-13732	1	5	:	:	PUNCT
fumecheng-13732	1	6	mechanical	mechanical	ADJ
fumecheng-13732	1	7	engineering	engineering	NOUN
fumecheng-13732	1	8	vol	vol	NOUN
fumecheng-13732	1	9	.	.	PROPN
fumecheng-13732	1	10	23	23	NUM
fumecheng-13732	1	11	,	,	PUNCT
fumecheng-13732	1	12	no	no	DET
fumecheng-13732	1	13	4	4	NUM
fumecheng-13732	1	14	,	,	PUNCT
fumecheng-13732	1	15	2025	2025	NUM
fumecheng-13732	1	16	,	,	PUNCT
fumecheng-13732	1	17	pp	pp	ADJ
fumecheng-13732	1	18	.	.	PUNCT
fumecheng-13732	2	1	649	649	NUM
fumecheng-13732	2	2	665	665	NUM
fumecheng-13732	2	3	https://doi.org/10.22190/fume250528023h	https://doi.org/10.22190/fume250528023h	NOUN
fumecheng-13732	2	4	©	©	PROPN
fumecheng-13732	2	5	2025	2025	NUM
fumecheng-13732	2	6	by	by	ADP
fumecheng-13732	2	7	university	university	PROPN
fumecheng-13732	2	8	of	of	ADP
fumecheng-13732	2	9	niš	niš	PROPN
fumecheng-13732	2	10	,	,	PUNCT
fumecheng-13732	2	11	serbia	serbia	PROPN
fumecheng-13732	2	12	|	|	ADV
fumecheng-13732	2	13	creative	creative	ADJ
fumecheng-13732	2	14	commons	common	NOUN
fumecheng-13732	2	15	license	license	NOUN
fumecheng-13732	2	16	:	:	PUNCT
fumecheng-13732	2	17	cc	cc	VERB
fumecheng-13732	2	18	by	by	ADP
fumecheng-13732	2	19	-	-	PUNCT
fumecheng-13732	2	20	nc	nc	VERB
fumecheng-13732	2	21	-	-	PUNCT
fumecheng-13732	2	22	nd	nd	ADV
fumecheng-13732	2	23	original	original	ADJ
fumecheng-13732	2	24	scientific	scientific	ADJ
fumecheng-13732	2	25	paper	paper	ADJ
fumecheng-13732	2	26	variational	variational	ADJ
fumecheng-13732	2	27	approach	approach	NOUN
fumecheng-13732	2	28	to	to	ADP
fumecheng-13732	2	29	micro	micro	ADJ
fumecheng-13732	2	30	-	-	ADJ
fumecheng-13732	2	31	electro	electro	ADJ
fumecheng-13732	2	32	-	-	PUNCT
fumecheng-13732	2	33	mechanical	mechanical	ADJ
fumecheng-13732	2	34	systems	system	NOUN
fumecheng-13732	2	35	ji	ji	PROPN
fumecheng-13732	2	36	-	-	PROPN
fumecheng-13732	2	37	huan	huan	PROPN
fumecheng-13732	2	38	he1,2,3,4	he1,2,3,4	PROPN
fumecheng-13732	2	39	,	,	PUNCT
fumecheng-13732	2	40	jinfeng	jinfeng	PROPN
fumecheng-13732	2	41	ma5	ma5	PROPN
fumecheng-13732	2	42	,	,	PUNCT
fumecheng-13732	2	43	abdulrahman	abdulrahman	PROPN
fumecheng-13732	2	44	ali	ali	PROPN
fumecheng-13732	2	45	alsolami6	alsolami6	PROPN
fumecheng-13732	2	46	,	,	PUNCT
fumecheng-13732	2	47	chun	chun	PROPN
fumecheng-13732	2	48	-	-	PUNCT
fumecheng-13732	2	49	hui	hui	PROPN
fumecheng-13732	2	50	he7,8	he7,8	PROPN
fumecheng-13732	3	1	1school	1school	NUM
fumecheng-13732	3	2	of	of	ADP
fumecheng-13732	3	3	information	information	NOUN
fumecheng-13732	3	4	engineering	engineering	NOUN
fumecheng-13732	3	5	,	,	PUNCT
fumecheng-13732	3	6	yango	yango	PROPN
fumecheng-13732	3	7	university	university	PROPN
fumecheng-13732	3	8	,	,	PUNCT
fumecheng-13732	3	9	fuzhou	fuzhou	PROPN
fumecheng-13732	3	10	,	,	PUNCT
fumecheng-13732	4	1	china	china	PROPN
fumecheng-13732	4	2	2department	2department	NUM
fumecheng-13732	4	3	of	of	ADP
fumecheng-13732	4	4	mathematical	mathematical	ADJ
fumecheng-13732	4	5	sciences	science	NOUN
fumecheng-13732	4	6	,	,	PUNCT
fumecheng-13732	4	7	saveetha	saveetha	PROPN
fumecheng-13732	4	8	school	school	NOUN
fumecheng-13732	4	9	of	of	ADP
fumecheng-13732	4	10	engineering	engineering	NOUN
fumecheng-13732	4	11	,	,	PUNCT
fumecheng-13732	4	12	simats	simat	NOUN
fumecheng-13732	4	13	,	,	PUNCT
fumecheng-13732	4	14	chennai	chennai	PROPN
fumecheng-13732	4	15	,	,	PUNCT
fumecheng-13732	4	16	tamil	tamil	PROPN
fumecheng-13732	4	17	nadu	nadu	PROPN
fumecheng-13732	4	18	,	,	PUNCT
fumecheng-13732	4	19	india	india	PROPN
fumecheng-13732	4	20	3school	3school	PROPN
fumecheng-13732	4	21	of	of	ADP
fumecheng-13732	4	22	jia	jia	PROPN
fumecheng-13732	4	23	yang	yang	PROPN
fumecheng-13732	4	24	;	;	PUNCT
fumecheng-13732	4	25	zhejiang	zhejiang	PROPN
fumecheng-13732	4	26	shuren	shuren	PROPN
fumecheng-13732	4	27	university	university	PROPN
fumecheng-13732	4	28	,	,	PUNCT
fumecheng-13732	4	29	hangzhou	hangzhou	PROPN
fumecheng-13732	4	30	,	,	PUNCT
fumecheng-13732	4	31	china	china	PROPN
fumecheng-13732	4	32	4school	4school	NUM
fumecheng-13732	4	33	of	of	ADP
fumecheng-13732	4	34	mathematics	mathematic	NOUN
fumecheng-13732	4	35	and	and	CCONJ
fumecheng-13732	4	36	big	big	ADJ
fumecheng-13732	4	37	data	datum	NOUN
fumecheng-13732	4	38	,	,	PUNCT
fumecheng-13732	4	39	hohhot	hohhot	PROPN
fumecheng-13732	4	40	minzu	minzu	PROPN
fumecheng-13732	4	41	college	college	NOUN
fumecheng-13732	4	42	,	,	PUNCT
fumecheng-13732	4	43	hohhot	hohhot	PROPN
fumecheng-13732	4	44	,	,	PUNCT
fumecheng-13732	4	45	china	china	PROPN
fumecheng-13732	4	46	5college	5college	NUM
fumecheng-13732	4	47	of	of	ADP
fumecheng-13732	4	48	civil	civil	ADJ
fumecheng-13732	4	49	engineering	engineering	NOUN
fumecheng-13732	4	50	and	and	CCONJ
fumecheng-13732	4	51	architecture	architecture	NOUN
fumecheng-13732	4	52	,	,	PUNCT
fumecheng-13732	4	53	jiaxing	jiaxing	PROPN
fumecheng-13732	4	54	university	university	PROPN
fumecheng-13732	4	55	,	,	PUNCT
fumecheng-13732	4	56	jiaxing	jiaxing	PROPN
fumecheng-13732	4	57	,	,	PUNCT
fumecheng-13732	4	58	china	china	PROPN
fumecheng-13732	4	59	6department	6department	NUM
fumecheng-13732	4	60	of	of	ADP
fumecheng-13732	4	61	mathematics	mathematic	NOUN
fumecheng-13732	4	62	,	,	PUNCT
fumecheng-13732	4	63	faculty	faculty	NOUN
fumecheng-13732	4	64	of	of	ADP
fumecheng-13732	4	65	science	science	NOUN
fumecheng-13732	4	66	,	,	PUNCT
fumecheng-13732	4	67	king	king	PROPN
fumecheng-13732	4	68	abdulaziz	abdulaziz	PROPN
fumecheng-13732	4	69	university	university	PROPN
fumecheng-13732	4	70	,	,	PUNCT
fumecheng-13732	4	71	saudi	saudi	PROPN
fumecheng-13732	4	72	arabia	arabia	PROPN
fumecheng-13732	4	73	7school	7school	NUM
fumecheng-13732	4	74	of	of	ADP
fumecheng-13732	4	75	civil	civil	ADJ
fumecheng-13732	4	76	engineering	engineering	NOUN
fumecheng-13732	4	77	&	&	CCONJ
fumecheng-13732	4	78	transportation	transportation	PROPN
fumecheng-13732	4	79	,	,	PUNCT
fumecheng-13732	4	80	foshan	foshan	PROPN
fumecheng-13732	4	81	university	university	PROPN
fumecheng-13732	4	82	,	,	PUNCT
fumecheng-13732	4	83	foshan	foshan	PROPN
fumecheng-13732	4	84	,	,	PUNCT
fumecheng-13732	4	85	china	china	PROPN
fumecheng-13732	4	86	8school	8school	NUM
fumecheng-13732	4	87	of	of	ADP
fumecheng-13732	4	88	mathematics	mathematic	NOUN
fumecheng-13732	4	89	,	,	PUNCT
fumecheng-13732	4	90	china	china	PROPN
fumecheng-13732	4	91	university	university	PROPN
fumecheng-13732	4	92	of	of	ADP
fumecheng-13732	4	93	mining	mining	NOUN
fumecheng-13732	4	94	and	and	CCONJ
fumecheng-13732	4	95	technology	technology	NOUN
fumecheng-13732	4	96	,	,	PUNCT
fumecheng-13732	4	97	xuzhou	xuzhou	PROPN
fumecheng-13732	4	98	china	china	PROPN
fumecheng-13732	4	99	orcid	orcid	PROPN
fumecheng-13732	4	100	ids	ids	PROPN
fumecheng-13732	4	101	:	:	PUNCT
fumecheng-13732	4	102	ji	ji	PROPN
fumecheng-13732	4	103	-	-	PROPN
fumecheng-13732	4	104	huan	huan	PROPN
fumecheng-13732	4	105	he	he	PRON
fumecheng-13732	4	106	https://orcid.org/0000-0002-1636-0559	https://orcid.org/0000-0002-1636-0559	VERB
fumecheng-13732	4	107	jinfeng	jinfeng	PROPN
fumecheng-13732	4	108	ma	ma	PROPN
fumecheng-13732	4	109	https://orcid.org/0009-0000-2348-9142	https://orcid.org/0009-0000-2348-9142	PROPN
fumecheng-13732	4	110	abdulrahman	abdulrahman	PROPN
fumecheng-13732	4	111	ali	ali	PROPN
fumecheng-13732	4	112	alsolami	alsolami	PROPN
fumecheng-13732	4	113	https://orcid.org/0000-0002-8189-4987	https://orcid.org/0000-0002-8189-4987	PROPN
fumecheng-13732	4	114	chun	chun	PROPN
fumecheng-13732	4	115	-	-	PUNCT
fumecheng-13732	4	116	hui	hui	PROPN
fumecheng-13732	5	1	he	he	PRON
fumecheng-13732	5	2	https://orcid.org/0000-0003-0810-5248	https://orcid.org/0000-0003-0810-5248	PROPN
fumecheng-13732	5	3	abstract	abstract	ADV
fumecheng-13732	5	4	.	.	PUNCT
fumecheng-13732	6	1	this	this	DET
fumecheng-13732	6	2	paper	paper	NOUN
fumecheng-13732	6	3	presents	present	VERB
fumecheng-13732	6	4	a	a	DET
fumecheng-13732	6	5	novel	novel	ADJ
fumecheng-13732	6	6	approach	approach	NOUN
fumecheng-13732	6	7	for	for	ADP
fumecheng-13732	6	8	formulating	formulate	VERB
fumecheng-13732	6	9	a	a	DET
fumecheng-13732	6	10	variational	variational	ADJ
fumecheng-13732	6	11	principle	principle	NOUN
fumecheng-13732	6	12	tailored	tailor	VERB
fumecheng-13732	6	13	to	to	ADP
fumecheng-13732	6	14	microelectromechanical	microelectromechanical	ADJ
fumecheng-13732	6	15	systems	system	NOUN
fumecheng-13732	6	16	(	(	PUNCT
fumecheng-13732	6	17	mems	mem	NOUN
fumecheng-13732	6	18	)	)	PUNCT
fumecheng-13732	6	19	through	through	ADP
fumecheng-13732	6	20	the	the	DET
fumecheng-13732	6	21	utilization	utilization	NOUN
fumecheng-13732	6	22	of	of	ADP
fumecheng-13732	6	23	the	the	DET
fumecheng-13732	6	24	semiinverse	semiinverse	NOUN
fumecheng-13732	6	25	method	method	NOUN
fumecheng-13732	6	26	.	.	PUNCT
fumecheng-13732	7	1	the	the	DET
fumecheng-13732	7	2	resulting	result	VERB
fumecheng-13732	7	3	variational	variational	ADJ
fumecheng-13732	7	4	principle	principle	NOUN
fumecheng-13732	7	5	is	be	AUX
fumecheng-13732	7	6	that	that	PRON
fumecheng-13732	7	7	of	of	ADP
fumecheng-13732	7	8	least	least	ADJ
fumecheng-13732	7	9	action	action	NOUN
fumecheng-13732	7	10	,	,	PUNCT
fumecheng-13732	7	11	which	which	PRON
fumecheng-13732	7	12	is	be	AUX
fumecheng-13732	7	13	of	of	ADP
fumecheng-13732	7	14	considerable	considerable	ADJ
fumecheng-13732	7	15	significance	significance	NOUN
fumecheng-13732	7	16	.	.	PUNCT
fumecheng-13732	8	1	the	the	DET
fumecheng-13732	8	2	newly	newly	ADV
fumecheng-13732	8	3	presented	present	VERB
fumecheng-13732	8	4	variational	variational	ADJ
fumecheng-13732	8	5	principle	principle	NOUN
fumecheng-13732	8	6	has	have	VERB
fumecheng-13732	8	7	the	the	DET
fumecheng-13732	8	8	potential	potential	NOUN
fumecheng-13732	8	9	to	to	PART
fumecheng-13732	8	10	be	be	AUX
fumecheng-13732	8	11	applied	apply	VERB
fumecheng-13732	8	12	in	in	ADP
fumecheng-13732	8	13	a	a	DET
fumecheng-13732	8	14	number	number	NOUN
fumecheng-13732	8	15	of	of	ADP
fumecheng-13732	8	16	advantageous	advantageous	ADJ
fumecheng-13732	8	17	ways	way	NOUN
fumecheng-13732	8	18	.	.	PUNCT
fumecheng-13732	9	1	one	one	NUM
fumecheng-13732	9	2	of	of	ADP
fumecheng-13732	9	3	the	the	DET
fumecheng-13732	9	4	primary	primary	ADJ
fumecheng-13732	9	5	applications	application	NOUN
fumecheng-13732	9	6	of	of	ADP
fumecheng-13732	9	7	this	this	DET
fumecheng-13732	9	8	approach	approach	NOUN
fumecheng-13732	9	9	is	be	AUX
fumecheng-13732	9	10	the	the	DET
fumecheng-13732	9	11	determination	determination	NOUN
fumecheng-13732	9	12	of	of	ADP
fumecheng-13732	9	13	the	the	DET
fumecheng-13732	9	14	pull	pull	NOUN
fumecheng-13732	9	15	-	-	PUNCT
fumecheng-13732	9	16	in	in	ADP
fumecheng-13732	9	17	voltage	voltage	NOUN
fumecheng-13732	9	18	.	.	PUNCT
fumecheng-13732	10	1	the	the	DET
fumecheng-13732	10	2	application	application	NOUN
fumecheng-13732	10	3	of	of	ADP
fumecheng-13732	10	4	this	this	DET
fumecheng-13732	10	5	principle	principle	NOUN
fumecheng-13732	10	6	allows	allow	VERB
fumecheng-13732	10	7	for	for	ADP
fumecheng-13732	10	8	a	a	DET
fumecheng-13732	10	9	more	more	ADV
fumecheng-13732	10	10	accurate	accurate	ADJ
fumecheng-13732	10	11	and	and	CCONJ
fumecheng-13732	10	12	efficient	efficient	ADJ
fumecheng-13732	10	13	determination	determination	NOUN
fumecheng-13732	10	14	of	of	ADP
fumecheng-13732	10	15	the	the	DET
fumecheng-13732	10	16	pull	pull	NOUN
fumecheng-13732	10	17	-	-	PUNCT
fumecheng-13732	10	18	in	in	ADP
fumecheng-13732	10	19	voltage	voltage	NOUN
fumecheng-13732	10	20	.	.	PUNCT
fumecheng-13732	11	1	this	this	PRON
fumecheng-13732	11	2	is	be	AUX
fumecheng-13732	11	3	of	of	ADP
fumecheng-13732	11	4	paramount	paramount	ADJ
fumecheng-13732	11	5	importance	importance	NOUN
fumecheng-13732	11	6	for	for	ADP
fumecheng-13732	11	7	the	the	DET
fumecheng-13732	11	8	optimal	optimal	ADJ
fumecheng-13732	11	9	functioning	functioning	NOUN
fumecheng-13732	11	10	and	and	CCONJ
fumecheng-13732	11	11	optimization	optimization	NOUN
fumecheng-13732	11	12	of	of	ADP
fumecheng-13732	11	13	mems	mem	NOUN
fumecheng-13732	11	14	devices	device	NOUN
fumecheng-13732	11	15	.	.	PUNCT
fumecheng-13732	12	1	the	the	DET
fumecheng-13732	12	2	enhanced	enhanced	ADJ
fumecheng-13732	12	3	accuracy	accuracy	NOUN
fumecheng-13732	12	4	in	in	ADP
fumecheng-13732	12	5	determining	determine	VERB
fumecheng-13732	12	6	the	the	DET
fumecheng-13732	12	7	pull	pull	VERB
fumecheng-13732	12	8	-	-	PUNCT
fumecheng-13732	12	9	in	in	ADP
fumecheng-13732	12	10	voltage	voltage	NOUN
fumecheng-13732	12	11	enables	enable	VERB
fumecheng-13732	12	12	more	more	ADV
fumecheng-13732	12	13	precise	precise	ADJ
fumecheng-13732	12	14	design	design	NOUN
fumecheng-13732	12	15	and	and	CCONJ
fumecheng-13732	12	16	greater	great	ADJ
fumecheng-13732	12	17	reliability	reliability	NOUN
fumecheng-13732	12	18	of	of	ADP
fumecheng-13732	12	19	memsbased	memsbase	VERB
fumecheng-13732	12	20	systems	system	NOUN
fumecheng-13732	12	21	.	.	PUNCT
fumecheng-13732	13	1	additionally	additionally	ADV
fumecheng-13732	13	2	,	,	PUNCT
fumecheng-13732	13	3	the	the	DET
fumecheng-13732	13	4	enhanced	enhanced	ADJ
fumecheng-13732	13	5	computational	computational	ADJ
fumecheng-13732	13	6	efficiency	efficiency	NOUN
fumecheng-13732	13	7	allows	allow	VERB
fumecheng-13732	13	8	for	for	ADP
fumecheng-13732	13	9	the	the	DET
fumecheng-13732	13	10	saving	saving	NOUN
fumecheng-13732	13	11	of	of	ADP
fumecheng-13732	13	12	valuable	valuable	ADJ
fumecheng-13732	13	13	time	time	NOUN
fumecheng-13732	13	14	and	and	CCONJ
fumecheng-13732	13	15	resources	resource	NOUN
fumecheng-13732	13	16	during	during	ADP
fumecheng-13732	13	17	the	the	DET
fumecheng-13732	13	18	design	design	NOUN
fumecheng-13732	13	19	process	process	NOUN
fumecheng-13732	13	20	.	.	PUNCT
fumecheng-13732	14	1	furthermore	furthermore	ADV
fumecheng-13732	14	2	,	,	PUNCT
fumecheng-13732	14	3	the	the	DET
fumecheng-13732	14	4	paper	paper	NOUN
fumecheng-13732	14	5	addresses	address	VERB
fumecheng-13732	14	6	the	the	DET
fumecheng-13732	14	7	topic	topic	NOUN
fumecheng-13732	14	8	of	of	ADP
fumecheng-13732	14	9	fractal	fractal	ADJ
fumecheng-13732	14	10	mems	mem	NOUN
fumecheng-13732	14	11	and	and	CCONJ
fumecheng-13732	14	12	puts	put	VERB
fumecheng-13732	14	13	forth	forth	ADP
fumecheng-13732	14	14	a	a	DET
fumecheng-13732	14	15	novel	novel	ADJ
fumecheng-13732	14	16	approach	approach	NOUN
fumecheng-13732	14	17	to	to	ADP
fumecheng-13732	14	18	fractional	fractional	ADJ
fumecheng-13732	14	19	differentiation	differentiation	NOUN
fumecheng-13732	14	20	based	base	VERB
fumecheng-13732	14	21	on	on	ADP
fumecheng-13732	14	22	two	two	NUM
fumecheng-13732	14	23	-	-	PUNCT
fumecheng-13732	14	24	scale	scale	NOUN
fumecheng-13732	14	25	fractal	fractal	ADJ
fumecheng-13732	14	26	differentiation	differentiation	NOUN
fumecheng-13732	14	27	,	,	PUNCT
fumecheng-13732	14	28	which	which	PRON
fumecheng-13732	14	29	is	be	AUX
fumecheng-13732	14	30	anticipated	anticipate	VERB
fumecheng-13732	14	31	to	to	PART
fumecheng-13732	14	32	facilitate	facilitate	VERB
fumecheng-13732	14	33	the	the	DET
fumecheng-13732	14	34	discovery	discovery	NOUN
fumecheng-13732	14	35	of	of	ADP
fumecheng-13732	14	36	new	new	ADJ
fumecheng-13732	14	37	insights	insight	NOUN
fumecheng-13732	14	38	and	and	CCONJ
fumecheng-13732	14	39	optimization	optimization	NOUN
fumecheng-13732	14	40	strategies	strategy	NOUN
fumecheng-13732	14	41	for	for	ADP
fumecheng-13732	14	42	mems	mem	NOUN
fumecheng-13732	14	43	devices	device	NOUN
fumecheng-13732	14	44	.	.	PUNCT
fumecheng-13732	15	1	key	key	ADJ
fumecheng-13732	15	2	words	word	NOUN
fumecheng-13732	15	3	:	:	PUNCT
fumecheng-13732	15	4	semi	semi	ADJ
fumecheng-13732	15	5	-	-	ADJ
fumecheng-13732	15	6	inverse	inverse	ADJ
fumecheng-13732	15	7	method	method	NOUN
fumecheng-13732	15	8	,	,	PUNCT
fumecheng-13732	15	9	pull	pull	NOUN
fumecheng-13732	15	10	-	-	PUNCT
fumecheng-13732	15	11	in	in	ADP
fumecheng-13732	15	12	instability	instability	NOUN
fumecheng-13732	15	13	,	,	PUNCT
fumecheng-13732	15	14	fractal	fractal	ADJ
fumecheng-13732	15	15	mems	mem	NOUN
fumecheng-13732	15	16	,	,	PUNCT
fumecheng-13732	15	17	two	two	NUM
fumecheng-13732	15	18	-	-	PUNCT
fumecheng-13732	15	19	scale	scale	NOUN
fumecheng-13732	15	20	fractal	fractal	ADJ
fumecheng-13732	15	21	derivative	derivative	NOUN
fumecheng-13732	15	22	based	base	VERB
fumecheng-13732	15	23	fractional	fractional	ADJ
fumecheng-13732	15	24	derivative	derivative	ADJ
fumecheng-13732	15	25	,	,	PUNCT
fumecheng-13732	15	26	wearable	wearable	ADJ
fumecheng-13732	15	27	textiles	textile	NOUN
fumecheng-13732	15	28	received	receive	VERB
fumecheng-13732	15	29	:	:	PUNCT
fumecheng-13732	15	30	may	may	AUX
fumecheng-13732	15	31	28	28	NUM
fumecheng-13732	15	32	,	,	PUNCT
fumecheng-13732	15	33	2025	2025	NUM
fumecheng-13732	15	34	/	/	SYM
fumecheng-13732	15	35	accepted	accept	VERB
fumecheng-13732	15	36	july	july	PROPN
fumecheng-13732	15	37	08	08	NUM
fumecheng-13732	15	38	,	,	PUNCT
fumecheng-13732	15	39	2025	2025	NUM
fumecheng-13732	15	40	corresponding	correspond	VERB
fumecheng-13732	15	41	author	author	NOUN
fumecheng-13732	15	42	:	:	PUNCT
fumecheng-13732	15	43	ji	ji	PROPN
fumecheng-13732	15	44	-	-	PROPN
fumecheng-13732	15	45	huan	huan	PROPN
fumecheng-13732	15	46	he	he	PRON
fumecheng-13732	15	47	,	,	PUNCT
fumecheng-13732	15	48	jinfeng	jinfeng	PROPN
fumecheng-13732	15	49	ma	ma	PROPN
fumecheng-13732	15	50	,	,	PUNCT
fumecheng-13732	15	51	chun	chun	PROPN
fumecheng-13732	15	52	-	-	PUNCT
fumecheng-13732	15	53	hui	hui	PROPN
fumecheng-13732	16	1	he	he	PRON
fumecheng-13732	16	2	school	school	PROPN
fumecheng-13732	16	3	of	of	ADP
fumecheng-13732	16	4	jia	jia	PROPN
fumecheng-13732	16	5	yang	yang	PROPN
fumecheng-13732	16	6	,	,	PUNCT
fumecheng-13732	16	7	zhejiang	zhejiang	PROPN
fumecheng-13732	16	8	shuren	shuren	PROPN
fumecheng-13732	16	9	university	university	PROPN
fumecheng-13732	16	10	,	,	PUNCT
fumecheng-13732	16	11	hangzhou	hangzhou	PROPN
fumecheng-13732	16	12	,	,	PUNCT
fumecheng-13732	16	13	china	china	PROPN
fumecheng-13732	16	14	college	college	PROPN
fumecheng-13732	16	15	of	of	ADP
fumecheng-13732	16	16	civil	civil	ADJ
fumecheng-13732	16	17	engineering	engineering	NOUN
fumecheng-13732	16	18	and	and	CCONJ
fumecheng-13732	16	19	architecture	architecture	NOUN
fumecheng-13732	16	20	,	,	PUNCT
fumecheng-13732	16	21	jiaxing	jiaxing	PROPN
fumecheng-13732	16	22	university	university	PROPN
fumecheng-13732	16	23	,	,	PUNCT
fumecheng-13732	16	24	jiaxing	jiaxing	PROPN
fumecheng-13732	16	25	,	,	PUNCT
fumecheng-13732	16	26	china	china	PROPN
fumecheng-13732	16	27	school	school	NOUN
fumecheng-13732	16	28	of	of	ADP
fumecheng-13732	16	29	civil	civil	ADJ
fumecheng-13732	16	30	engineering	engineering	NOUN
fumecheng-13732	16	31	&	&	CCONJ
fumecheng-13732	16	32	transportation	transportation	PROPN
fumecheng-13732	16	33	,	,	PUNCT
fumecheng-13732	16	34	foshan	foshan	PROPN
fumecheng-13732	16	35	university	university	PROPN
fumecheng-13732	16	36	,	,	PUNCT
fumecheng-13732	16	37	foshan	foshan	PROPN
fumecheng-13732	16	38	,	,	PUNCT
fumecheng-13732	16	39	china	china	PROPN
fumecheng-13732	16	40	email	email	NOUN
fumecheng-13732	16	41	:	:	PUNCT
fumecheng-13732	16	42	hejihuan@ygu.edu.cn	hejihuan@ygu.edu.cn	PROPN
fumecheng-13732	16	43	(	(	PUNCT
fumecheng-13732	16	44	j.h	j.h	PROPN
fumecheng-13732	16	45	.	.	PUNCT
fumecheng-13732	16	46	he	he	PRON
fumecheng-13732	16	47	)	)	PUNCT
fumecheng-13732	16	48	,	,	PUNCT
fumecheng-13732	16	49	majinfenglz@163.com	majinfenglz@163.com	PROPN
fumecheng-13732	16	50	(	(	PUNCT
fumecheng-13732	16	51	j.	j.	PROPN
fumecheng-13732	16	52	m	m	PROPN
fumecheng-13732	16	53	)	)	PUNCT
fumecheng-13732	16	54	,	,	PUNCT
fumecheng-13732	16	55	mathew_he@yahoo.com	mathew_he@yahoo.com	X
fumecheng-13732	16	56	(	(	PUNCT
fumecheng-13732	16	57	c.h	c.h	PROPN
fumecheng-13732	16	58	.	.	PUNCT
fumecheng-13732	17	1	he	he	PRON
fumecheng-13732	17	2	)	)	PUNCT
fumecheng-13732	17	3	650	650	NUM
fumecheng-13732	17	4	j.h	j.h	PROPN
fumecheng-13732	17	5	.	.	PUNCT
fumecheng-13732	18	1	he	he	PRON
fumecheng-13732	18	2	,	,	PUNCT
fumecheng-13732	18	3	j.	j.	PROPN
fumecheng-13732	18	4	ma	ma	PROPN
fumecheng-13732	18	5	,	,	PUNCT
fumecheng-13732	18	6	a.a	a.a	PROPN
fumecheng-13732	18	7	.	.	PROPN
fumecheng-13732	18	8	alsolam	alsolam	PROPN
fumecheng-13732	18	9	,	,	PUNCT
fumecheng-13732	18	10	c.h	c.h	PROPN
fumecheng-13732	18	11	.	.	PUNCT
fumecheng-13732	18	12	he	he	PRON
fumecheng-13732	18	13	1	1	NUM
fumecheng-13732	18	14	.	.	PUNCT
fumecheng-13732	19	1	introduction	introduction	NOUN
fumecheng-13732	19	2	micro	micro	PROPN
fumecheng-13732	19	3	-	-	ADJ
fumecheng-13732	19	4	electro	electro	ADJ
fumecheng-13732	19	5	-	-	PUNCT
fumecheng-13732	19	6	mechanical	mechanical	ADJ
fumecheng-13732	19	7	systems	system	NOUN
fumecheng-13732	19	8	(	(	PUNCT
fumecheng-13732	19	9	mems	mem	NOUN
fumecheng-13732	19	10	)	)	PUNCT
fumecheng-13732	19	11	have	have	AUX
fumecheng-13732	19	12	been	be	AUX
fumecheng-13732	19	13	instrumental	instrumental	ADJ
fumecheng-13732	19	14	in	in	ADP
fumecheng-13732	19	15	the	the	DET
fumecheng-13732	19	16	modern	modern	ADJ
fumecheng-13732	19	17	technological	technological	ADJ
fumecheng-13732	19	18	landscape	landscape	NOUN
fumecheng-13732	19	19	,	,	PUNCT
fumecheng-13732	19	20	primarily	primarily	ADV
fumecheng-13732	19	21	due	due	ADP
fumecheng-13732	19	22	to	to	ADP
fumecheng-13732	19	23	their	their	PRON
fumecheng-13732	19	24	ability	ability	NOUN
fumecheng-13732	19	25	to	to	PART
fumecheng-13732	19	26	facilitate	facilitate	VERB
fumecheng-13732	19	27	the	the	DET
fumecheng-13732	19	28	development	development	NOUN
fumecheng-13732	19	29	of	of	ADP
fumecheng-13732	19	30	miniature	miniature	ADJ
fumecheng-13732	19	31	integrated	integrate	VERB
fumecheng-13732	19	32	devices	device	NOUN
fumecheng-13732	19	33	that	that	PRON
fumecheng-13732	19	34	effectively	effectively	ADV
fumecheng-13732	19	35	combine	combine	VERB
fumecheng-13732	19	36	mechanical	mechanical	ADJ
fumecheng-13732	19	37	and	and	CCONJ
fumecheng-13732	19	38	electrical	electrical	ADJ
fumecheng-13732	19	39	functionalities	functionality	NOUN
fumecheng-13732	19	40	[	[	X
fumecheng-13732	19	41	1	1	NUM
fumecheng-13732	19	42	]	]	PUNCT
fumecheng-13732	19	43	.	.	PUNCT
fumecheng-13732	20	1	their	their	PRON
fumecheng-13732	20	2	applications	application	NOUN
fumecheng-13732	20	3	are	be	AUX
fumecheng-13732	20	4	found	find	VERB
fumecheng-13732	20	5	in	in	ADP
fumecheng-13732	20	6	critical	critical	ADJ
fumecheng-13732	20	7	fields	field	NOUN
fumecheng-13732	20	8	,	,	PUNCT
fumecheng-13732	20	9	such	such	ADJ
fumecheng-13732	20	10	as	as	ADP
fumecheng-13732	20	11	wearable	wearable	ADJ
fumecheng-13732	20	12	textiles	textile	NOUN
fumecheng-13732	20	13	[	[	X
fumecheng-13732	20	14	2	2	NUM
fumecheng-13732	20	15	]	]	PUNCT
fumecheng-13732	20	16	.	.	PUNCT
fumecheng-13732	21	1	mems	mem	NOUN
fumecheng-13732	21	2	sensors	sensor	NOUN
fumecheng-13732	21	3	have	have	AUX
fumecheng-13732	21	4	been	be	AUX
fumecheng-13732	21	5	developed	develop	VERB
fumecheng-13732	21	6	for	for	ADP
fumecheng-13732	21	7	the	the	DET
fumecheng-13732	21	8	monitoring	monitoring	NOUN
fumecheng-13732	21	9	of	of	ADP
fumecheng-13732	21	10	physiological	physiological	ADJ
fumecheng-13732	21	11	parameters	parameter	NOUN
fumecheng-13732	21	12	,	,	PUNCT
fumecheng-13732	21	13	including	include	VERB
fumecheng-13732	21	14	heart	heart	NOUN
fumecheng-13732	21	15	rate	rate	NOUN
fumecheng-13732	21	16	and	and	CCONJ
fumecheng-13732	21	17	body	body	NOUN
fumecheng-13732	21	18	temperature	temperature	NOUN
fumecheng-13732	21	19	,	,	PUNCT
fumecheng-13732	21	20	with	with	ADP
fumecheng-13732	21	21	exceptional	exceptional	ADJ
fumecheng-13732	21	22	precision	precision	NOUN
fumecheng-13732	21	23	.	.	PUNCT
fumecheng-13732	22	1	flexible	flexible	ADJ
fumecheng-13732	22	2	actuators	actuator	NOUN
fumecheng-13732	22	3	have	have	AUX
fumecheng-13732	22	4	been	be	AUX
fumecheng-13732	22	5	incorporated	incorporate	VERB
fumecheng-13732	22	6	into	into	ADP
fumecheng-13732	22	7	adaptive	adaptive	ADJ
fumecheng-13732	22	8	clothing	clothing	NOUN
fumecheng-13732	22	9	,	,	PUNCT
fumecheng-13732	22	10	thereby	thereby	ADV
fumecheng-13732	22	11	empowering	empower	VERB
fumecheng-13732	22	12	it	it	PRON
fumecheng-13732	22	13	to	to	PART
fumecheng-13732	22	14	respond	respond	VERB
fumecheng-13732	22	15	dynamically	dynamically	ADV
fumecheng-13732	22	16	to	to	ADP
fumecheng-13732	22	17	environmental	environmental	ADJ
fumecheng-13732	22	18	stimuli	stimulus	NOUN
fumecheng-13732	22	19	.	.	PUNCT
fumecheng-13732	23	1	in	in	ADP
fumecheng-13732	23	2	the	the	DET
fumecheng-13732	23	3	domain	domain	NOUN
fumecheng-13732	23	4	of	of	ADP
fumecheng-13732	23	5	biomedical	biomedical	ADJ
fumecheng-13732	23	6	engineering	engineering	NOUN
fumecheng-13732	23	7	,	,	PUNCT
fumecheng-13732	23	8	mems	mem	NOUN
fumecheng-13732	23	9	devices	device	NOUN
fumecheng-13732	23	10	play	play	VERB
fumecheng-13732	23	11	a	a	DET
fumecheng-13732	23	12	pivotal	pivotal	ADJ
fumecheng-13732	23	13	role	role	NOUN
fumecheng-13732	23	14	in	in	ADP
fumecheng-13732	23	15	facilitating	facilitate	VERB
fumecheng-13732	23	16	targeted	target	VERB
fumecheng-13732	23	17	drug	drug	NOUN
fumecheng-13732	23	18	delivery	delivery	NOUN
fumecheng-13732	23	19	and	and	CCONJ
fumecheng-13732	23	20	real	real	ADJ
fumecheng-13732	23	21	-	-	PUNCT
fumecheng-13732	23	22	time	time	NOUN
fumecheng-13732	23	23	diagnostics	diagnostic	NOUN
fumecheng-13732	23	24	.	.	PUNCT
fumecheng-13732	24	1	these	these	DET
fumecheng-13732	24	2	devices	device	NOUN
fumecheng-13732	24	3	leverage	leverage	VERB
fumecheng-13732	24	4	their	their	PRON
fumecheng-13732	24	5	microscale	microscale	ADJ
fumecheng-13732	24	6	size	size	NOUN
fumecheng-13732	24	7	to	to	PART
fumecheng-13732	24	8	interact	interact	VERB
fumecheng-13732	24	9	seamlessly	seamlessly	ADV
fumecheng-13732	24	10	with	with	ADP
fumecheng-13732	24	11	biological	biological	ADJ
fumecheng-13732	24	12	systems	system	NOUN
fumecheng-13732	24	13	,	,	PUNCT
fumecheng-13732	24	14	a	a	DET
fumecheng-13732	24	15	property	property	NOUN
fumecheng-13732	24	16	that	that	PRON
fumecheng-13732	24	17	has	have	AUX
fumecheng-13732	24	18	been	be	AUX
fumecheng-13732	24	19	demonstrated	demonstrate	VERB
fumecheng-13732	24	20	to	to	PART
fumecheng-13732	24	21	support	support	VERB
fumecheng-13732	24	22	inner	inner	ADJ
fumecheng-13732	24	23	ear	ear	NOUN
fumecheng-13732	24	24	theragnostics	theragnostic	NOUN
fumecheng-13732	24	25	[	[	X
fumecheng-13732	24	26	4	4	NUM
fumecheng-13732	24	27	]	]	PUNCT
fumecheng-13732	24	28	.	.	PUNCT
fumecheng-13732	25	1	furthermore	furthermore	ADV
fumecheng-13732	25	2	,	,	PUNCT
fumecheng-13732	25	3	mems	mem	NOUN
fumecheng-13732	25	4	oscillators	oscillator	NOUN
fumecheng-13732	25	5	function	function	VERB
fumecheng-13732	25	6	as	as	ADP
fumecheng-13732	25	7	essential	essential	ADJ
fumecheng-13732	25	8	components	component	NOUN
fumecheng-13732	25	9	in	in	ADP
fumecheng-13732	25	10	communication	communication	NOUN
fumecheng-13732	25	11	systems	system	NOUN
fumecheng-13732	25	12	,	,	PUNCT
fumecheng-13732	25	13	providing	provide	VERB
fumecheng-13732	25	14	stable	stable	ADJ
fumecheng-13732	25	15	timing	timing	NOUN
fumecheng-13732	25	16	signals	signal	NOUN
fumecheng-13732	25	17	that	that	PRON
fumecheng-13732	25	18	are	be	AUX
fumecheng-13732	25	19	crucial	crucial	ADJ
fumecheng-13732	25	20	for	for	ADP
fumecheng-13732	25	21	6	6	NUM
fumecheng-13732	25	22	g	g	NOUN
fumecheng-13732	25	23	and	and	CCONJ
fumecheng-13732	25	24	subsequent	subsequent	ADJ
fumecheng-13732	25	25	generations	generation	NOUN
fumecheng-13732	25	26	[	[	X
fumecheng-13732	25	27	5	5	NUM
fumecheng-13732	25	28	]	]	PUNCT
fumecheng-13732	25	29	.	.	PUNCT
fumecheng-13732	26	1	roy	roy	PROPN
fumecheng-13732	26	2	et	et	PROPN
fumecheng-13732	26	3	al	al	PROPN
fumecheng-13732	26	4	.	.	PUNCT
fumecheng-13732	27	1	[	[	X
fumecheng-13732	27	2	6	6	NUM
fumecheng-13732	27	3	]	]	PUNCT
fumecheng-13732	27	4	developed	develop	VERB
fumecheng-13732	27	5	a	a	DET
fumecheng-13732	27	6	generative	generative	ADJ
fumecheng-13732	27	7	ai	ai	VERB
fumecheng-13732	27	8	-	-	PUNCT
fumecheng-13732	27	9	assisted	assist	VERB
fumecheng-13732	27	10	piezo	piezo	PROPN
fumecheng-13732	27	11	-	-	ADJ
fumecheng-13732	27	12	mems	mems	ADJ
fumecheng-13732	27	13	ultrasound	ultrasound	NOUN
fumecheng-13732	27	14	device	device	NOUN
fumecheng-13732	27	15	tailored	tailor	VERB
fumecheng-13732	27	16	for	for	ADP
fumecheng-13732	27	17	plant	plant	NOUN
fumecheng-13732	27	18	dehydration	dehydration	NOUN
fumecheng-13732	27	19	monitoring	monitoring	NOUN
fumecheng-13732	27	20	.	.	PUNCT
fumecheng-13732	28	1	this	this	DET
fumecheng-13732	28	2	device	device	NOUN
fumecheng-13732	28	3	merges	merge	VERB
fumecheng-13732	28	4	piezo	piezo	ADJ
fumecheng-13732	28	5	-	-	ADJ
fumecheng-13732	28	6	mems	mems	ADJ
fumecheng-13732	28	7	technology	technology	NOUN
fumecheng-13732	28	8	with	with	ADP
fumecheng-13732	28	9	generative	generative	NOUN
fumecheng-13732	28	10	ai	ai	VERB
fumecheng-13732	28	11	to	to	PART
fumecheng-13732	28	12	enable	enable	VERB
fumecheng-13732	28	13	efficient	efficient	ADJ
fumecheng-13732	28	14	tracking	tracking	NOUN
fumecheng-13732	28	15	of	of	ADP
fumecheng-13732	28	16	plant	plant	NOUN
fumecheng-13732	28	17	water	water	NOUN
fumecheng-13732	28	18	status	status	NOUN
fumecheng-13732	28	19	.	.	PUNCT
fumecheng-13732	29	1	liang	liang	PROPN
fumecheng-13732	29	2	and	and	CCONJ
fumecheng-13732	29	3	lin	lin	PROPN
fumecheng-13732	30	1	[	[	X
fumecheng-13732	30	2	7	7	X
fumecheng-13732	30	3	]	]	PUNCT
fumecheng-13732	30	4	introduced	introduce	VERB
fumecheng-13732	30	5	a	a	DET
fumecheng-13732	30	6	mems	mem	NOUN
fumecheng-13732	30	7	electrothermal	electrothermal	ADJ
fumecheng-13732	30	8	actuator	actuator	NOUN
fumecheng-13732	30	9	(	(	PUNCT
fumecheng-13732	30	10	eta	eta	NOUN
fumecheng-13732	30	11	)	)	PUNCT
fumecheng-13732	30	12	featuring	feature	VERB
fumecheng-13732	30	13	highly	highly	ADV
fumecheng-13732	30	14	linear	linear	ADJ
fumecheng-13732	30	15	actuation	actuation	NOUN
fumecheng-13732	30	16	and	and	CCONJ
fumecheng-13732	30	17	stable	stable	ADJ
fumecheng-13732	30	18	characteristics	characteristic	NOUN
fumecheng-13732	30	19	.	.	PUNCT
fumecheng-13732	31	1	the	the	DET
fumecheng-13732	31	2	actuator	actuator	NOUN
fumecheng-13732	31	3	under	under	ADP
fumecheng-13732	31	4	consideration	consideration	NOUN
fumecheng-13732	31	5	consists	consist	NOUN
fumecheng-13732	31	6	of	of	ADP
fumecheng-13732	31	7	a	a	DET
fumecheng-13732	31	8	bilayer	bilayer	NOUN
fumecheng-13732	31	9	cantilever	cantilever	NOUN
fumecheng-13732	31	10	array	array	NOUN
fumecheng-13732	31	11	of	of	ADP
fumecheng-13732	31	12	au	au	ADJ
fumecheng-13732	31	13	and	and	CCONJ
fumecheng-13732	31	14	si₃n₄	si₃n₄	PROPN
fumecheng-13732	31	15	,	,	PUNCT
fumecheng-13732	31	16	and	and	CCONJ
fumecheng-13732	31	17	it	it	PRON
fumecheng-13732	31	18	is	be	AUX
fumecheng-13732	31	19	compatible	compatible	ADJ
fumecheng-13732	31	20	with	with	ADP
fumecheng-13732	31	21	standard	standard	ADJ
fumecheng-13732	31	22	cmos	cmos	NOUN
fumecheng-13732	31	23	manufacturing	manufacturing	NOUN
fumecheng-13732	31	24	processes	process	NOUN
fumecheng-13732	31	25	.	.	PUNCT
fumecheng-13732	32	1	the	the	DET
fumecheng-13732	32	2	device	device	NOUN
fumecheng-13732	32	3	's	's	PART
fumecheng-13732	32	4	surface	surface	NOUN
fumecheng-13732	32	5	roughness	roughness	NOUN
fumecheng-13732	32	6	engineering	engineering	NOUN
fumecheng-13732	32	7	prevents	prevent	VERB
fumecheng-13732	32	8	stiction	stiction	NOUN
fumecheng-13732	32	9	,	,	PUNCT
fumecheng-13732	32	10	exhibits	exhibit	VERB
fumecheng-13732	32	11	exceptional	exceptional	ADJ
fumecheng-13732	32	12	linearity	linearity	NOUN
fumecheng-13732	32	13	between	between	ADP
fumecheng-13732	32	14	displacement	displacement	NOUN
fumecheng-13732	32	15	and	and	CCONJ
fumecheng-13732	32	16	squared	squared	ADJ
fumecheng-13732	32	17	driving	driving	NOUN
fumecheng-13732	32	18	voltage	voltage	NOUN
fumecheng-13732	32	19	,	,	PUNCT
fumecheng-13732	32	20	achieves	achieve	VERB
fumecheng-13732	32	21	an	an	DET
fumecheng-13732	32	22	ultra	ultra	ADJ
fumecheng-13732	32	23	-	-	ADJ
fumecheng-13732	32	24	low	low	ADJ
fumecheng-13732	32	25	power	power	NOUN
fumecheng-13732	32	26	consumption	consumption	NOUN
fumecheng-13732	32	27	of	of	ADP
fumecheng-13732	32	28	7.5	7.5	NUM
fumecheng-13732	32	29	mw	mw	NOUN
fumecheng-13732	32	30	,	,	PUNCT
fumecheng-13732	32	31	and	and	CCONJ
fumecheng-13732	32	32	maintains	maintain	VERB
fumecheng-13732	32	33	stable	stable	ADJ
fumecheng-13732	32	34	performance	performance	NOUN
fumecheng-13732	32	35	over	over	ADP
fumecheng-13732	32	36	100	100	NUM
fumecheng-13732	32	37	cycles	cycle	NOUN
fumecheng-13732	32	38	.	.	PUNCT
fumecheng-13732	33	1	potential	potential	ADJ
fumecheng-13732	33	2	applications	application	NOUN
fumecheng-13732	33	3	include	include	VERB
fumecheng-13732	33	4	optical	optical	ADJ
fumecheng-13732	33	5	modulation	modulation	NOUN
fumecheng-13732	33	6	and	and	CCONJ
fumecheng-13732	33	7	medical	medical	ADJ
fumecheng-13732	33	8	imaging	imaging	NOUN
fumecheng-13732	33	9	,	,	PUNCT
fumecheng-13732	33	10	among	among	ADP
fumecheng-13732	33	11	others	other	NOUN
fumecheng-13732	33	12	.	.	PUNCT
fumecheng-13732	34	1	these	these	DET
fumecheng-13732	34	2	diverse	diverse	ADJ
fumecheng-13732	34	3	applications	application	NOUN
fumecheng-13732	34	4	necessitate	necessitate	ADJ
fumecheng-13732	34	5	accurate	accurate	ADJ
fumecheng-13732	34	6	models	model	NOUN
fumecheng-13732	34	7	to	to	PART
fumecheng-13732	34	8	predict	predict	VERB
fumecheng-13732	34	9	dynamic	dynamic	ADJ
fumecheng-13732	34	10	behaviors	behavior	NOUN
fumecheng-13732	34	11	,	,	PUNCT
fumecheng-13732	34	12	particularly	particularly	ADV
fumecheng-13732	34	13	pull	pull	VERB
fumecheng-13732	34	14	-	-	PUNCT
fumecheng-13732	34	15	in	in	ADP
fumecheng-13732	34	16	instability	instability	NOUN
fumecheng-13732	34	17	–	–	PUNCT
fumecheng-13732	34	18	a	a	DET
fumecheng-13732	34	19	phenomenon	phenomenon	NOUN
fumecheng-13732	34	20	where	where	SCONJ
fumecheng-13732	34	21	electrostatic	electrostatic	ADJ
fumecheng-13732	34	22	forces	force	NOUN
fumecheng-13732	34	23	surpass	surpass	VERB
fumecheng-13732	34	24	mechanical	mechanical	ADJ
fumecheng-13732	34	25	restoring	restore	VERB
fumecheng-13732	34	26	forces	force	NOUN
fumecheng-13732	34	27	,	,	PUNCT
fumecheng-13732	34	28	leading	lead	VERB
fumecheng-13732	34	29	to	to	ADP
fumecheng-13732	34	30	device	device	NOUN
fumecheng-13732	34	31	failure	failure	NOUN
fumecheng-13732	34	32	and	and	CCONJ
fumecheng-13732	34	33	compromising	compromise	VERB
fumecheng-13732	34	34	operational	operational	ADJ
fumecheng-13732	34	35	reliability	reliability	NOUN
fumecheng-13732	34	36	[	[	X
fumecheng-13732	34	37	8	8	NUM
fumecheng-13732	34	38	]	]	PUNCT
fumecheng-13732	34	39	.	.	PUNCT
fumecheng-13732	35	1	the	the	DET
fumecheng-13732	35	2	variational	variational	ADJ
fumecheng-13732	35	3	principle	principle	NOUN
fumecheng-13732	35	4	has	have	AUX
fumecheng-13732	35	5	long	long	ADV
fumecheng-13732	35	6	served	serve	VERB
fumecheng-13732	35	7	as	as	ADP
fumecheng-13732	35	8	a	a	DET
fumecheng-13732	35	9	foundational	foundational	ADJ
fumecheng-13732	35	10	tenet	tenet	NOUN
fumecheng-13732	35	11	within	within	ADP
fumecheng-13732	35	12	the	the	DET
fumecheng-13732	35	13	realm	realm	NOUN
fumecheng-13732	35	14	of	of	ADP
fumecheng-13732	35	15	theoretical	theoretical	ADJ
fumecheng-13732	35	16	physics	physics	NOUN
fumecheng-13732	35	17	,	,	PUNCT
fumecheng-13732	35	18	offering	offer	VERB
fumecheng-13732	35	19	a	a	DET
fumecheng-13732	35	20	unifying	unifying	ADJ
fumecheng-13732	35	21	framework	framework	NOUN
fumecheng-13732	35	22	for	for	ADP
fumecheng-13732	35	23	the	the	DET
fumecheng-13732	35	24	analysis	analysis	NOUN
fumecheng-13732	35	25	of	of	ADP
fumecheng-13732	35	26	system	system	NOUN
fumecheng-13732	35	27	dynamics	dynamic	NOUN
fumecheng-13732	35	28	through	through	ADP
fumecheng-13732	35	29	the	the	DET
fumecheng-13732	35	30	minimization	minimization	NOUN
fumecheng-13732	35	31	of	of	ADP
fumecheng-13732	35	32	energy	energy	NOUN
fumecheng-13732	35	33	.	.	PUNCT
fumecheng-13732	36	1	from	from	ADP
fumecheng-13732	36	2	hamilton	hamilton	PROPN
fumecheng-13732	36	3	's	's	PART
fumecheng-13732	36	4	principle	principle	NOUN
fumecheng-13732	36	5	,	,	PUNCT
fumecheng-13732	36	6	which	which	PRON
fumecheng-13732	36	7	governs	govern	VERB
fumecheng-13732	36	8	classical	classical	ADJ
fumecheng-13732	36	9	mechanics	mechanic	NOUN
fumecheng-13732	36	10	,	,	PUNCT
fumecheng-13732	36	11	to	to	ADP
fumecheng-13732	36	12	its	its	PRON
fumecheng-13732	36	13	extensions	extension	NOUN
fumecheng-13732	36	14	in	in	ADP
fumecheng-13732	36	15	field	field	NOUN
fumecheng-13732	36	16	theory	theory	NOUN
fumecheng-13732	36	17	and	and	CCONJ
fumecheng-13732	36	18	quantum	quantum	NOUN
fumecheng-13732	36	19	mechanics	mechanic	NOUN
fumecheng-13732	36	20	,	,	PUNCT
fumecheng-13732	36	21	variational	variational	ADJ
fumecheng-13732	36	22	methods	method	NOUN
fumecheng-13732	36	23	integrate	integrate	VERB
fumecheng-13732	36	24	conservation	conservation	NOUN
fumecheng-13732	36	25	laws	law	NOUN
fumecheng-13732	36	26	and	and	CCONJ
fumecheng-13732	36	27	dynamic	dynamic	ADJ
fumecheng-13732	36	28	constraints	constraint	NOUN
fumecheng-13732	36	29	into	into	ADP
fumecheng-13732	36	30	a	a	DET
fumecheng-13732	36	31	single	single	ADJ
fumecheng-13732	36	32	formulation	formulation	NOUN
fumecheng-13732	36	33	[	[	X
fumecheng-13732	36	34	9	9	NUM
fumecheng-13732	36	35	]	]	PUNCT
fumecheng-13732	36	36	.	.	PUNCT
fumecheng-13732	37	1	in	in	ADP
fumecheng-13732	37	2	the	the	DET
fumecheng-13732	37	3	field	field	NOUN
fumecheng-13732	37	4	of	of	ADP
fumecheng-13732	37	5	mems	mems	PROPN
fumecheng-13732	37	6	research	research	NOUN
fumecheng-13732	37	7	,	,	PUNCT
fumecheng-13732	37	8	early	early	ADJ
fumecheng-13732	37	9	applications	application	NOUN
fumecheng-13732	37	10	of	of	ADP
fumecheng-13732	37	11	variational	variational	ADJ
fumecheng-13732	37	12	principles	principle	NOUN
fumecheng-13732	37	13	centered	center	VERB
fumecheng-13732	37	14	on	on	ADP
fumecheng-13732	37	15	linear	linear	PROPN
fumecheng-13732	37	16	oscillations	oscillation	NOUN
fumecheng-13732	37	17	and	and	CCONJ
fumecheng-13732	37	18	elementary	elementary	ADJ
fumecheng-13732	37	19	geometries	geometry	NOUN
fumecheng-13732	37	20	[	[	X
fumecheng-13732	37	21	10	10	NUM
fumecheng-13732	37	22	]	]	PUNCT
fumecheng-13732	37	23	,	,	PUNCT
fumecheng-13732	37	24	drawing	draw	VERB
fumecheng-13732	37	25	on	on	ADP
fumecheng-13732	37	26	techniques	technique	NOUN
fumecheng-13732	37	27	such	such	ADJ
fumecheng-13732	37	28	as	as	ADP
fumecheng-13732	37	29	the	the	DET
fumecheng-13732	37	30	variational	variational	ADJ
fumecheng-13732	37	31	iteration	iteration	NOUN
fumecheng-13732	37	32	method	method	NOUN
fumecheng-13732	37	33	[	[	X
fumecheng-13732	37	34	11	11	NUM
fumecheng-13732	37	35	]	]	PUNCT
fumecheng-13732	37	36	and	and	CCONJ
fumecheng-13732	37	37	finite	finite	ADJ
fumecheng-13732	37	38	element	element	NOUN
fumecheng-13732	37	39	analysis	analysis	NOUN
fumecheng-13732	37	40	[	[	X
fumecheng-13732	37	41	12	12	NUM
fumecheng-13732	37	42	]	]	PUNCT
fumecheng-13732	37	43	.	.	PUNCT
fumecheng-13732	38	1	however	however	ADV
fumecheng-13732	38	2	,	,	PUNCT
fumecheng-13732	38	3	these	these	DET
fumecheng-13732	38	4	approaches	approach	NOUN
fumecheng-13732	38	5	encounter	encounter	VERB
fumecheng-13732	38	6	challenges	challenge	NOUN
fumecheng-13732	38	7	due	due	ADJ
fumecheng-13732	38	8	to	to	ADP
fumecheng-13732	38	9	nonlinear	nonlinear	ADJ
fumecheng-13732	38	10	electrostatic	electrostatic	ADJ
fumecheng-13732	38	11	-	-	PUNCT
fumecheng-13732	38	12	mechanical	mechanical	ADJ
fumecheng-13732	38	13	coupling	coupling	NOUN
fumecheng-13732	38	14	,	,	PUNCT
fumecheng-13732	38	15	microscale	microscale	ADJ
fumecheng-13732	38	16	effects	effect	NOUN
fumecheng-13732	38	17	(	(	PUNCT
fumecheng-13732	38	18	e.g.	e.g.	ADV
fumecheng-13732	38	19	,	,	PUNCT
fumecheng-13732	38	20	surface	surface	NOUN
fumecheng-13732	38	21	tension	tension	NOUN
fumecheng-13732	38	22	)	)	PUNCT
fumecheng-13732	38	23	,	,	PUNCT
fumecheng-13732	38	24	and	and	CCONJ
fumecheng-13732	38	25	complex	complex	ADJ
fumecheng-13732	38	26	fractal	fractal	ADJ
fumecheng-13732	38	27	geometries	geometry	NOUN
fumecheng-13732	38	28	.	.	PUNCT
fumecheng-13732	39	1	these	these	DET
fumecheng-13732	39	2	limitations	limitation	NOUN
fumecheng-13732	39	3	hinder	hinder	VERB
fumecheng-13732	39	4	the	the	DET
fumecheng-13732	39	5	accuracy	accuracy	NOUN
fumecheng-13732	39	6	of	of	ADP
fumecheng-13732	39	7	predictions	prediction	NOUN
fumecheng-13732	39	8	of	of	ADP
fumecheng-13732	39	9	critical	critical	ADJ
fumecheng-13732	39	10	parameters	parameter	NOUN
fumecheng-13732	39	11	like	like	ADP
fumecheng-13732	39	12	pull	pull	NOUN
fumecheng-13732	39	13	-	-	PUNCT
fumecheng-13732	39	14	in	in	ADP
fumecheng-13732	39	15	voltage	voltage	NOUN
fumecheng-13732	39	16	[	[	X
fumecheng-13732	39	17	13	13	NUM
fumecheng-13732	39	18	,	,	PUNCT
fumecheng-13732	39	19	14	14	NUM
fumecheng-13732	39	20	]	]	PUNCT
fumecheng-13732	39	21	.	.	PUNCT
fumecheng-13732	40	1	concurrently	concurrently	ADV
fumecheng-13732	40	2	,	,	PUNCT
fumecheng-13732	40	3	niu	niu	PROPN
fumecheng-13732	40	4	has	have	AUX
fumecheng-13732	40	5	substantiated	substantiate	VERB
fumecheng-13732	40	6	the	the	DET
fumecheng-13732	40	7	robust	robust	ADJ
fumecheng-13732	40	8	minimum	minimum	ADJ
fumecheng-13732	40	9	condition	condition	NOUN
fumecheng-13732	40	10	of	of	ADP
fumecheng-13732	40	11	a	a	DET
fumecheng-13732	40	12	variational	variational	ADJ
fumecheng-13732	40	13	formulation	formulation	NOUN
fumecheng-13732	40	14	applicable	applicable	ADJ
fumecheng-13732	40	15	to	to	ADP
fumecheng-13732	40	16	mems	mem	NOUN
fumecheng-13732	40	17	systems	system	NOUN
fumecheng-13732	40	18	[	[	X
fumecheng-13732	40	19	15	15	NUM
fumecheng-13732	40	20	]	]	PUNCT
fumecheng-13732	40	21	.	.	PUNCT
fumecheng-13732	41	1	against	against	ADP
fumecheng-13732	41	2	this	this	DET
fumecheng-13732	41	3	backdrop	backdrop	NOUN
fumecheng-13732	41	4	,	,	PUNCT
fumecheng-13732	41	5	the	the	DET
fumecheng-13732	41	6	need	need	NOUN
fumecheng-13732	41	7	for	for	ADP
fumecheng-13732	41	8	a	a	DET
fumecheng-13732	41	9	tailored	tailor	VERB
fumecheng-13732	41	10	variational	variational	ADJ
fumecheng-13732	41	11	principle	principle	NOUN
fumecheng-13732	41	12	for	for	ADP
fumecheng-13732	41	13	mems	mem	NOUN
fumecheng-13732	41	14	becomes	become	VERB
fumecheng-13732	41	15	evident	evident	ADJ
fumecheng-13732	41	16	[	[	X
fumecheng-13732	41	17	16	16	NUM
fumecheng-13732	41	18	]	]	PUNCT
fumecheng-13732	41	19	.	.	PUNCT
fumecheng-13732	42	1	traditional	traditional	ADJ
fumecheng-13732	42	2	models	model	NOUN
fumecheng-13732	42	3	fail	fail	VERB
fumecheng-13732	42	4	to	to	PART
fumecheng-13732	42	5	capture	capture	VERB
fumecheng-13732	42	6	singularities	singularity	NOUN
fumecheng-13732	42	7	in	in	ADP
fumecheng-13732	42	8	displacement	displacement	ADJ
fumecheng-13732	42	9	fields	field	NOUN
fumecheng-13732	42	10	and	and	CCONJ
fumecheng-13732	42	11	overlook	overlook	VERB
fumecheng-13732	42	12	fractal	fractal	ADV
fumecheng-13732	42	13	-	-	PUNCT
fumecheng-13732	42	14	induced	induce	VERB
fumecheng-13732	42	15	dynamics	dynamic	NOUN
fumecheng-13732	42	16	,	,	PUNCT
fumecheng-13732	42	17	leading	lead	VERB
fumecheng-13732	42	18	to	to	ADP
fumecheng-13732	42	19	design	design	NOUN
fumecheng-13732	42	20	inefficiencies	inefficiency	NOUN
fumecheng-13732	42	21	.	.	PUNCT
fumecheng-13732	43	1	this	this	DET
fumecheng-13732	43	2	paper	paper	NOUN
fumecheng-13732	43	3	addresses	address	VERB
fumecheng-13732	43	4	these	these	DET
fumecheng-13732	43	5	gaps	gap	NOUN
fumecheng-13732	43	6	by	by	ADP
fumecheng-13732	43	7	developing	develop	VERB
fumecheng-13732	43	8	a	a	DET
fumecheng-13732	43	9	novel	novel	ADJ
fumecheng-13732	43	10	variational	variational	ADJ
fumecheng-13732	43	11	formulation	formulation	NOUN
fumecheng-13732	43	12	via	via	ADP
fumecheng-13732	43	13	the	the	DET
fumecheng-13732	43	14	semi	semi	ADJ
fumecheng-13732	43	15	-	-	ADJ
fumecheng-13732	43	16	inverse	inverse	ADJ
fumecheng-13732	43	17	method	method	NOUN
fumecheng-13732	43	18	,	,	PUNCT
fumecheng-13732	43	19	with	with	ADP
fumecheng-13732	43	20	applications	application	NOUN
fumecheng-13732	43	21	to	to	PART
fumecheng-13732	43	22	pull	pull	VERB
fumecheng-13732	43	23	-	-	PUNCT
fumecheng-13732	43	24	in	in	ADP
fumecheng-13732	43	25	instability	instability	NOUN
fumecheng-13732	43	26	analysis	analysis	NOUN
fumecheng-13732	43	27	and	and	CCONJ
fumecheng-13732	43	28	fractal	fractal	ADJ
fumecheng-13732	43	29	mems	mem	NOUN
fumecheng-13732	43	30	modeling	modeling	NOUN
fumecheng-13732	43	31	.	.	PUNCT
fumecheng-13732	44	1	variational	variational	ADJ
fumecheng-13732	44	2	approach	approach	NOUN
fumecheng-13732	44	3	to	to	ADP
fumecheng-13732	44	4	micro	micro	ADJ
fumecheng-13732	44	5	-	-	ADJ
fumecheng-13732	44	6	electro	electro	ADJ
fumecheng-13732	44	7	-	-	PUNCT
fumecheng-13732	44	8	mechanical	mechanical	ADJ
fumecheng-13732	44	9	systems	system	NOUN
fumecheng-13732	44	10	651	651	NUM
fumecheng-13732	44	11	2	2	NUM
fumecheng-13732	44	12	.	.	PUNCT
fumecheng-13732	44	13	mems	mems	PROPN
fumecheng-13732	44	14	oscillator	oscillator	NOUN
fumecheng-13732	44	15	following	follow	VERB
fumecheng-13732	44	16	the	the	DET
fumecheng-13732	44	17	notable	notable	ADJ
fumecheng-13732	44	18	developments	development	NOUN
fumecheng-13732	44	19	of	of	ADP
fumecheng-13732	44	20	the	the	DET
fumecheng-13732	44	21	duffing	duffing	NOUN
fumecheng-13732	44	22	oscillator	oscillator	NOUN
fumecheng-13732	44	23	and	and	CCONJ
fumecheng-13732	44	24	van	van	PROPN
fumecheng-13732	44	25	der	der	PROPN
fumecheng-13732	44	26	pol	pol	PROPN
fumecheng-13732	44	27	oscillator	oscillator	NOUN
fumecheng-13732	44	28	,	,	PUNCT
fumecheng-13732	44	29	the	the	DET
fumecheng-13732	44	30	mems	mem	NOUN
fumecheng-13732	44	31	oscillator	oscillator	NOUN
fumecheng-13732	44	32	is	be	AUX
fumecheng-13732	44	33	identified	identify	VERB
fumecheng-13732	44	34	as	as	ADP
fumecheng-13732	44	35	the	the	DET
fumecheng-13732	44	36	subsequent	subsequent	ADJ
fumecheng-13732	44	37	most	most	ADV
fumecheng-13732	44	38	crucial	crucial	ADJ
fumecheng-13732	44	39	component	component	NOUN
fumecheng-13732	44	40	in	in	ADP
fumecheng-13732	44	41	the	the	DET
fumecheng-13732	44	42	domain	domain	NOUN
fumecheng-13732	44	43	of	of	ADP
fumecheng-13732	44	44	nanotechnology	nanotechnology	NOUN
fumecheng-13732	44	45	.	.	PUNCT
fumecheng-13732	45	1	a	a	DET
fumecheng-13732	45	2	mems	mem	NOUN
fumecheng-13732	45	3	oscillator	oscillator	NOUN
fumecheng-13732	45	4	represents	represent	VERB
fumecheng-13732	45	5	a	a	DET
fumecheng-13732	45	6	revolutionary	revolutionary	ADJ
fumecheng-13732	45	7	timing	timing	NOUN
fumecheng-13732	45	8	device	device	NOUN
fumecheng-13732	45	9	that	that	PRON
fumecheng-13732	45	10	has	have	AUX
fumecheng-13732	45	11	gained	gain	VERB
fumecheng-13732	45	12	significant	significant	ADJ
fumecheng-13732	45	13	prominence	prominence	NOUN
fumecheng-13732	45	14	within	within	ADP
fumecheng-13732	45	15	the	the	DET
fumecheng-13732	45	16	field	field	NOUN
fumecheng-13732	45	17	of	of	ADP
fumecheng-13732	45	18	electronics	electronic	NOUN
fumecheng-13732	45	19	.	.	PUNCT
fumecheng-13732	46	1	it	it	PRON
fumecheng-13732	46	2	employs	employ	VERB
fumecheng-13732	46	3	microelectromechanical	microelectromechanical	ADJ
fumecheng-13732	46	4	systems	system	NOUN
fumecheng-13732	46	5	technology	technology	NOUN
fumecheng-13732	46	6	to	to	PART
fumecheng-13732	46	7	facilitate	facilitate	VERB
fumecheng-13732	46	8	precise	precise	ADJ
fumecheng-13732	46	9	and	and	CCONJ
fumecheng-13732	46	10	reliable	reliable	ADJ
fumecheng-13732	46	11	oscillatory	oscillatory	ADJ
fumecheng-13732	46	12	behavior	behavior	NOUN
fumecheng-13732	46	13	.	.	PUNCT
fumecheng-13732	47	1	the	the	DET
fumecheng-13732	47	2	micromachining	micromachine	VERB
fumecheng-13732	47	3	technology	technology	NOUN
fumecheng-13732	47	4	that	that	PRON
fumecheng-13732	47	5	emerged	emerge	VERB
fumecheng-13732	47	6	in	in	ADP
fumecheng-13732	47	7	the	the	DET
fumecheng-13732	47	8	late	late	ADJ
fumecheng-13732	47	9	1980s	1980	NOUN
fumecheng-13732	47	10	enables	enable	VERB
fumecheng-13732	47	11	the	the	DET
fumecheng-13732	47	12	fabrication	fabrication	NOUN
fumecheng-13732	47	13	of	of	ADP
fumecheng-13732	47	14	sensors	sensor	NOUN
fumecheng-13732	47	15	and	and	CCONJ
fumecheng-13732	47	16	actuators	actuator	NOUN
fumecheng-13732	47	17	with	with	ADP
fumecheng-13732	47	18	a	a	DET
fumecheng-13732	47	19	micron	micron	NOUN
fumecheng-13732	47	20	-	-	PUNCT
fumecheng-13732	47	21	scale	scale	NOUN
fumecheng-13732	47	22	resolution	resolution	NOUN
fumecheng-13732	47	23	.	.	PUNCT
fumecheng-13732	48	1	such	such	ADJ
fumecheng-13732	48	2	micro	micro	NOUN
fumecheng-13732	48	3	transducers	transducer	NOUN
fumecheng-13732	48	4	can	can	AUX
fumecheng-13732	48	5	be	be	AUX
fumecheng-13732	48	6	integrated	integrate	VERB
fumecheng-13732	48	7	with	with	ADP
fumecheng-13732	48	8	signal	signal	NOUN
fumecheng-13732	48	9	conditioning	conditioning	NOUN
fumecheng-13732	48	10	and	and	CCONJ
fumecheng-13732	48	11	processing	processing	NOUN
fumecheng-13732	48	12	circuitry	circuitry	NOUN
fumecheng-13732	48	13	to	to	PART
fumecheng-13732	48	14	form	form	VERB
fumecheng-13732	48	15	microelectromechanical	microelectromechanical	ADJ
fumecheng-13732	48	16	-	-	PUNCT
fumecheng-13732	48	17	systems	system	NOUN
fumecheng-13732	48	18	,	,	PUNCT
fumecheng-13732	48	19	which	which	PRON
fumecheng-13732	48	20	are	be	AUX
fumecheng-13732	48	21	capable	capable	ADJ
fumecheng-13732	48	22	of	of	ADP
fumecheng-13732	48	23	performing	perform	VERB
fumecheng-13732	48	24	real	real	ADJ
fumecheng-13732	48	25	-	-	PUNCT
fumecheng-13732	48	26	time	time	NOUN
fumecheng-13732	48	27	distributed	distribute	VERB
fumecheng-13732	48	28	control	control	NOUN
fumecheng-13732	48	29	.	.	PUNCT
fumecheng-13732	49	1	the	the	DET
fumecheng-13732	49	2	system	system	NOUN
fumecheng-13732	49	3	operates	operate	VERB
fumecheng-13732	49	4	periodically	periodically	ADV
fumecheng-13732	49	5	in	in	ADP
fumecheng-13732	49	6	general	general	ADJ
fumecheng-13732	49	7	,	,	PUNCT
fumecheng-13732	49	8	but	but	CCONJ
fumecheng-13732	49	9	the	the	DET
fumecheng-13732	49	10	pseudo	pseudo	NOUN
fumecheng-13732	49	11	-	-	ADJ
fumecheng-13732	49	12	pull	pull	NOUN
fumecheng-13732	49	13	-	-	PUNCT
fumecheng-13732	49	14	in	in	ADP
fumecheng-13732	49	15	stability	stability	NOUN
fumecheng-13732	49	16	is	be	AUX
fumecheng-13732	49	17	a	a	DET
fumecheng-13732	49	18	subject	subject	NOUN
fumecheng-13732	49	19	of	of	ADP
fumecheng-13732	49	20	research	research	NOUN
fumecheng-13732	49	21	study	study	NOUN
fumecheng-13732	49	22	[	[	X
fumecheng-13732	49	23	17	17	NUM
fumecheng-13732	49	24	,	,	PUNCT
fumecheng-13732	49	25	18	18	NUM
fumecheng-13732	49	26	]	]	PUNCT
fumecheng-13732	49	27	.	.	PUNCT
fumecheng-13732	50	1	the	the	DET
fumecheng-13732	50	2	dimensionless	dimensionless	NOUN
fumecheng-13732	50	3	mems	mem	NOUN
fumecheng-13732	50	4	oscillator	oscillator	NOUN
fumecheng-13732	50	5	can	can	AUX
fumecheng-13732	50	6	be	be	AUX
fumecheng-13732	50	7	written	write	VERB
fumecheng-13732	50	8	as	as	ADP
fumecheng-13732	50	9	[	[	X
fumecheng-13732	50	10	17	17	NUM
fumecheng-13732	50	11	]	]	SYM
fumecheng-13732	50	12	:	:	PUNCT
fumecheng-13732	50	13	0	0	NUM
fumecheng-13732	50	14	1	1	NUM
fumecheng-13732	50	15	m	m	PROPN
fumecheng-13732	50	16	w	w	PROPN
fumecheng-13732	50	17	w	w	PROPN
fumecheng-13732	50	18	w	w	PROPN
fumecheng-13732	50	19			PROPN
fumecheng-13732	50	20	+	+	CCONJ
fumecheng-13732	50	21	−	−	PROPN
fumecheng-13732	50	22	=	=	SYM
fumecheng-13732	50	23	−	−	PROPN
fumecheng-13732	50	24	(	(	PUNCT
fumecheng-13732	50	25	1	1	NUM
fumecheng-13732	50	26	)	)	PUNCT
fumecheng-13732	50	27	where	where	SCONJ
fumecheng-13732	50	28	w	w	NOUN
fumecheng-13732	50	29	is	be	AUX
fumecheng-13732	50	30	the	the	DET
fumecheng-13732	50	31	dimensionless	dimensionless	NOUN
fumecheng-13732	50	32	displacement	displacement	NOUN
fumecheng-13732	50	33	,	,	PUNCT
fumecheng-13732	50	34	0	0	PUNCT
fumecheng-13732	50	35	<	<	X
fumecheng-13732	50	36	w<1	w<1	ADJ
fumecheng-13732	50	37	,	,	PUNCT
fumecheng-13732	50	38	and	and	CCONJ
fumecheng-13732	50	39	m	m	PROPN
fumecheng-13732	50	40	is	be	AUX
fumecheng-13732	50	41	voltage	voltage	NOUN
fumecheng-13732	50	42	-	-	PUNCT
fumecheng-13732	50	43	related	relate	VERB
fumecheng-13732	50	44	parameter	parameter	NOUN
fumecheng-13732	50	45	.	.	PUNCT
fumecheng-13732	51	1	this	this	DET
fumecheng-13732	51	2	equation	equation	NOUN
fumecheng-13732	51	3	arises	arise	VERB
fumecheng-13732	51	4	from	from	ADP
fumecheng-13732	51	5	the	the	DET
fumecheng-13732	51	6	dynamic	dynamic	ADJ
fumecheng-13732	51	7	balance	balance	NOUN
fumecheng-13732	51	8	between	between	ADP
fumecheng-13732	51	9	mechanical	mechanical	ADJ
fumecheng-13732	51	10	restoring	restore	VERB
fumecheng-13732	51	11	forces	force	NOUN
fumecheng-13732	51	12	and	and	CCONJ
fumecheng-13732	51	13	electrostatic	electrostatic	ADJ
fumecheng-13732	51	14	forces	force	NOUN
fumecheng-13732	51	15	in	in	ADP
fumecheng-13732	51	16	a	a	DET
fumecheng-13732	51	17	parallel	parallel	ADJ
fumecheng-13732	51	18	-	-	PUNCT
fumecheng-13732	51	19	plate	plate	NOUN
fumecheng-13732	51	20	mems	mem	NOUN
fumecheng-13732	51	21	structure	structure	NOUN
fumecheng-13732	51	22	.	.	PUNCT
fumecheng-13732	52	1	when	when	SCONJ
fumecheng-13732	52	2	m	m	PROPN
fumecheng-13732	52	3	is	be	AUX
fumecheng-13732	52	4	small	small	ADJ
fumecheng-13732	52	5	,	,	PUNCT
fumecheng-13732	52	6	eq	eq	ADJ
fumecheng-13732	52	7	.	.	PUNCT
fumecheng-13732	53	1	(	(	PUNCT
fumecheng-13732	53	2	1	1	X
fumecheng-13732	53	3	)	)	PUNCT
fumecheng-13732	53	4	has	have	VERB
fumecheng-13732	53	5	periodic	periodic	ADJ
fumecheng-13732	53	6	solution	solution	NOUN
fumecheng-13732	53	7	,	,	PUNCT
fumecheng-13732	53	8	however	however	ADV
fumecheng-13732	53	9	,	,	PUNCT
fumecheng-13732	53	10	when	when	SCONJ
fumecheng-13732	53	11	m	m	NOUN
fumecheng-13732	53	12	is	be	AUX
fumecheng-13732	53	13	larger	large	ADJ
fumecheng-13732	53	14	than	than	ADP
fumecheng-13732	53	15	a	a	DET
fumecheng-13732	53	16	threshold	threshold	NOUN
fumecheng-13732	53	17	value	value	NOUN
fumecheng-13732	53	18	,	,	PUNCT
fumecheng-13732	53	19	m	m	PROPN
fumecheng-13732	53	20	*	*	PUNCT
fumecheng-13732	53	21	,	,	PUNCT
fumecheng-13732	53	22	the	the	DET
fumecheng-13732	53	23	pull	pull	NOUN
fumecheng-13732	53	24	-	-	PUNCT
fumecheng-13732	53	25	in	in	ADP
fumecheng-13732	53	26	motion	motion	NOUN
fumecheng-13732	53	27	occurs	occur	VERB
fumecheng-13732	53	28	,	,	PUNCT
fumecheng-13732	53	29	and	and	CCONJ
fumecheng-13732	53	30	m	m	PROPN
fumecheng-13732	53	31	*	*	VERB
fumecheng-13732	53	32	is	be	AUX
fumecheng-13732	53	33	often	often	ADV
fumecheng-13732	53	34	called	call	VERB
fumecheng-13732	53	35	as	as	ADP
fumecheng-13732	53	36	the	the	DET
fumecheng-13732	53	37	pull	pull	NOUN
fumecheng-13732	53	38	-	-	PUNCT
fumecheng-13732	53	39	in	in	ADP
fumecheng-13732	53	40	voltage	voltage	NOUN
fumecheng-13732	53	41	.	.	PUNCT
fumecheng-13732	54	1	this	this	DET
fumecheng-13732	54	2	equation	equation	NOUN
fumecheng-13732	54	3	possesses	possess	VERB
fumecheng-13732	54	4	distinctive	distinctive	ADJ
fumecheng-13732	54	5	characteristics	characteristic	NOUN
fumecheng-13732	54	6	,	,	PUNCT
fumecheng-13732	54	7	namely	namely	ADV
fumecheng-13732	54	8	:	:	PUNCT
fumecheng-13732	54	9	1	1	X
fumecheng-13732	54	10	)	)	PUNCT
fumecheng-13732	54	11	zero	zero	NUM
fumecheng-13732	54	12	initial	initial	ADJ
fumecheng-13732	54	13	conditions	condition	NOUN
fumecheng-13732	54	14	,	,	PUNCT
fumecheng-13732	54	15	i.e.	i.e.	X
fumecheng-13732	54	16	,	,	PUNCT
fumecheng-13732	54	17	w(0)=0	w(0)=0	PROPN
fumecheng-13732	54	18	and	and	CCONJ
fumecheng-13732	54	19	w’(0)=0	w’(0)=0	NOUN
fumecheng-13732	54	20	;	;	PUNCT
fumecheng-13732	54	21	and	and	CCONJ
fumecheng-13732	54	22	2	2	X
fumecheng-13732	54	23	)	)	PUNCT
fumecheng-13732	54	24	the	the	DET
fumecheng-13732	54	25	singularity	singularity	NOUN
fumecheng-13732	54	26	at	at	ADP
fumecheng-13732	54	27	w=1	w=1	PROPN
fumecheng-13732	54	28	.	.	PUNCT
fumecheng-13732	55	1	nevertheless	nevertheless	ADV
fumecheng-13732	55	2	,	,	PUNCT
fumecheng-13732	55	3	it	it	PRON
fumecheng-13732	55	4	can	can	AUX
fumecheng-13732	55	5	be	be	AUX
fumecheng-13732	55	6	effectively	effectively	ADV
fumecheng-13732	55	7	solved	solve	VERB
fumecheng-13732	55	8	by	by	ADP
fumecheng-13732	55	9	the	the	DET
fumecheng-13732	55	10	homotopy	homotopy	NOUN
fumecheng-13732	55	11	perturbation	perturbation	NOUN
fumecheng-13732	55	12	method	method	NOUN
fumecheng-13732	55	13	[	[	X
fumecheng-13732	55	14	19	19	NUM
fumecheng-13732	55	15	,	,	PUNCT
fumecheng-13732	55	16	20	20	NUM
fumecheng-13732	55	17	,	,	PUNCT
fumecheng-13732	55	18	21	21	NUM
fumecheng-13732	55	19	]	]	PUNCT
fumecheng-13732	55	20	,	,	PUNCT
fumecheng-13732	55	21	the	the	DET
fumecheng-13732	55	22	variational	variational	ADJ
fumecheng-13732	55	23	iteration	iteration	NOUN
fumecheng-13732	55	24	method	method	NOUN
fumecheng-13732	55	25	[	[	X
fumecheng-13732	55	26	22	22	NUM
fumecheng-13732	55	27	,	,	PUNCT
fumecheng-13732	55	28	23	23	NUM
fumecheng-13732	55	29	]	]	PUNCT
fumecheng-13732	55	30	,	,	PUNCT
fumecheng-13732	55	31	and	and	CCONJ
fumecheng-13732	55	32	he	he	PRON
fumecheng-13732	55	33	-	-	PUNCT
fumecheng-13732	55	34	liu	liu	PROPN
fumecheng-13732	55	35	’s	’s	PART
fumecheng-13732	55	36	modified	modify	VERB
fumecheng-13732	55	37	frequency	frequency	NOUN
fumecheng-13732	55	38	formulation	formulation	NOUN
fumecheng-13732	55	39	[	[	X
fumecheng-13732	55	40	24	24	NUM
fumecheng-13732	55	41	]	]	PUNCT
fumecheng-13732	55	42	,	,	PUNCT
fumecheng-13732	55	43	albeit	albeit	SCONJ
fumecheng-13732	55	44	with	with	ADP
fumecheng-13732	55	45	the	the	DET
fumecheng-13732	55	46	aid	aid	NOUN
fumecheng-13732	55	47	of	of	ADP
fumecheng-13732	55	48	certain	certain	ADJ
fumecheng-13732	55	49	special	special	ADJ
fumecheng-13732	55	50	techniques	technique	NOUN
fumecheng-13732	55	51	.	.	PUNCT
fumecheng-13732	56	1	the	the	DET
fumecheng-13732	56	2	variational	variational	ADJ
fumecheng-13732	56	3	principle	principle	NOUN
fumecheng-13732	56	4	in	in	ADP
fumecheng-13732	56	5	mems	mems	ADJ
fumecheng-13732	56	6	systems	system	NOUN
fumecheng-13732	56	7	constitutes	constitute	VERB
fumecheng-13732	56	8	a	a	DET
fumecheng-13732	56	9	fundamental	fundamental	ADJ
fumecheng-13732	56	10	concept	concept	NOUN
fumecheng-13732	56	11	that	that	PRON
fumecheng-13732	56	12	facilitates	facilitate	VERB
fumecheng-13732	56	13	comprehension	comprehension	NOUN
fumecheng-13732	56	14	and	and	CCONJ
fumecheng-13732	56	15	analysis	analysis	NOUN
fumecheng-13732	56	16	of	of	ADP
fumecheng-13732	56	17	the	the	DET
fumecheng-13732	56	18	behavior	behavior	NOUN
fumecheng-13732	56	19	of	of	ADP
fumecheng-13732	56	20	these	these	DET
fumecheng-13732	56	21	complex	complex	ADJ
fumecheng-13732	56	22	systems	system	NOUN
fumecheng-13732	56	23	(	(	PUNCT
fumecheng-13732	56	24	see	see	VERB
fumecheng-13732	56	25	ref	ref	NOUN
fumecheng-13732	56	26	.	.	PUNCT
fumecheng-13732	57	1	[	[	X
fumecheng-13732	57	2	10	10	NUM
fumecheng-13732	57	3	]	]	NUM
fumecheng-13732	57	4	)	)	PUNCT
fumecheng-13732	57	5	.	.	PUNCT
fumecheng-13732	58	1	to	to	PART
fumecheng-13732	58	2	explain	explain	VERB
fumecheng-13732	58	3	eq	eq	ADP
fumecheng-13732	58	4	.	.	PUNCT
fumecheng-13732	59	1	(	(	PUNCT
fumecheng-13732	59	2	1	1	X
fumecheng-13732	59	3	)	)	PUNCT
fumecheng-13732	59	4	in	in	ADP
fumecheng-13732	59	5	a	a	DET
fumecheng-13732	59	6	mechanical	mechanical	ADJ
fumecheng-13732	59	7	view	view	NOUN
fumecheng-13732	59	8	,	,	PUNCT
fumecheng-13732	59	9	we	we	PRON
fumecheng-13732	59	10	consider	consider	VERB
fumecheng-13732	59	11	the	the	DET
fumecheng-13732	59	12	motion	motion	NOUN
fumecheng-13732	59	13	for	for	ADP
fumecheng-13732	59	14	a	a	DET
fumecheng-13732	59	15	particle	particle	NOUN
fumecheng-13732	59	16	with	with	ADP
fumecheng-13732	59	17	unit	unit	NOUN
fumecheng-13732	59	18	mass	mass	NOUN
fumecheng-13732	59	19	in	in	ADP
fumecheng-13732	59	20	a	a	DET
fumecheng-13732	59	21	potential	potential	ADJ
fumecheng-13732	59	22	field	field	NOUN
fumecheng-13732	59	23	v	v	NOUN
fumecheng-13732	59	24	:	:	PUNCT
fumecheng-13732	59	25	21	21	NUM
fumecheng-13732	59	26	(	(	PUNCT
fumecheng-13732	59	27	)	)	PUNCT
fumecheng-13732	60	1	ln(1	ln(1	ADJ
fumecheng-13732	60	2	)	)	PUNCT
fumecheng-13732	60	3	2	2	NUM
fumecheng-13732	60	4	v	v	NOUN
fumecheng-13732	60	5	w	w	PROPN
fumecheng-13732	60	6	w	w	PROPN
fumecheng-13732	60	7	m	m	VERB
fumecheng-13732	60	8	w=	w=	NOUN
fumecheng-13732	60	9	+	+	CCONJ
fumecheng-13732	61	1	−	−	PROPN
fumecheng-13732	62	1	(	(	PUNCT
fumecheng-13732	62	2	2	2	NUM
fumecheng-13732	62	3	)	)	PUNCT
fumecheng-13732	62	4	the	the	DET
fumecheng-13732	62	5	variational	variational	ADJ
fumecheng-13732	62	6	principle	principle	NOUN
fumecheng-13732	62	7	of	of	ADP
fumecheng-13732	62	8	mems	mem	NOUN
fumecheng-13732	62	9	oscillator	oscillator	NOUN
fumecheng-13732	62	10	given	give	VERB
fumecheng-13732	62	11	in	in	ADP
fumecheng-13732	62	12	eq	eq	ADP
fumecheng-13732	62	13	.	.	PUNCT
fumecheng-13732	63	1	(	(	PUNCT
fumecheng-13732	63	2	1	1	X
fumecheng-13732	63	3	)	)	PUNCT
fumecheng-13732	63	4	can	can	AUX
fumecheng-13732	63	5	be	be	AUX
fumecheng-13732	63	6	written	write	VERB
fumecheng-13732	63	7	in	in	ADP
fumecheng-13732	63	8	the	the	DET
fumecheng-13732	63	9	form	form	NOUN
fumecheng-13732	63	10	2	2	NUM
fumecheng-13732	63	11	2	2	NUM
fumecheng-13732	63	12	21	21	NUM
fumecheng-13732	63	13	1	1	NUM
fumecheng-13732	63	14	1	1	NUM
fumecheng-13732	63	15	(	(	PUNCT
fumecheng-13732	63	16	)	)	PUNCT
fumecheng-13732	63	17	(	(	PUNCT
fumecheng-13732	63	18	)	)	PUNCT
fumecheng-13732	63	19	ln(1	ln(1	X
fumecheng-13732	63	20	)	)	PUNCT
fumecheng-13732	63	21	2	2	NUM
fumecheng-13732	63	22	2	2	NUM
fumecheng-13732	63	23	2	2	NUM
fumecheng-13732	63	24	j	j	PROPN
fumecheng-13732	63	25	w	w	PROPN
fumecheng-13732	63	26	w	w	PROPN
fumecheng-13732	63	27	v	v	PROPN
fumecheng-13732	63	28	w	w	PROPN
fumecheng-13732	63	29	dt	dt	PROPN
fumecheng-13732	63	30	w	w	PROPN
fumecheng-13732	63	31	w	w	PROPN
fumecheng-13732	63	32	m	m	PROPN
fumecheng-13732	63	33	w	w	NOUN
fumecheng-13732	63	34	dt	dt	NOUN
fumecheng-13732	63	35			NOUN
fumecheng-13732	64	1			NOUN
fumecheng-13732	64	2			NOUN
fumecheng-13732	65	1			PROPN
fumecheng-13732	65	2			ADV
fumecheng-13732	65	3	=	=	INTJ
fumecheng-13732	65	4	−	−	PROPN
fumecheng-13732	66	1	=	=	SYM
fumecheng-13732	66	2	−	−	PROPN
fumecheng-13732	66	3	−	−	PROPN
fumecheng-13732	66	4	−	−	NOUN
fumecheng-13732	66	5			INTJ
fumecheng-13732	67	1			NUM
fumecheng-13732	67	2			INTJ
fumecheng-13732	68	1			PROPN
fumecheng-13732	68	2			PROPN
fumecheng-13732	69	1			NUM
fumecheng-13732	69	2			NOUN
fumecheng-13732	69	3			X
fumecheng-13732	69	4			X
fumecheng-13732	69	5	(	(	PUNCT
fumecheng-13732	69	6	3	3	NUM
fumecheng-13732	69	7	)	)	PUNCT
fumecheng-13732	69	8	according	accord	VERB
fumecheng-13732	69	9	to	to	ADP
fumecheng-13732	69	10	the	the	DET
fumecheng-13732	69	11	variational	variational	ADJ
fumecheng-13732	69	12	formulation	formulation	NOUN
fumecheng-13732	69	13	given	give	VERB
fumecheng-13732	69	14	in	in	ADP
fumecheng-13732	69	15	eq	eq	ADP
fumecheng-13732	69	16	.	.	PUNCT
fumecheng-13732	70	1	(	(	PUNCT
fumecheng-13732	70	2	3	3	NUM
fumecheng-13732	70	3	)	)	PUNCT
fumecheng-13732	70	4	,	,	PUNCT
fumecheng-13732	70	5	the	the	DET
fumecheng-13732	70	6	following	follow	VERB
fumecheng-13732	70	7	identity	identity	NOUN
fumecheng-13732	70	8	2	2	NUM
fumecheng-13732	70	9	21	21	NUM
fumecheng-13732	70	10	1	1	NUM
fumecheng-13732	70	11	ln(1	ln(1	NOUN
fumecheng-13732	70	12	)	)	PUNCT
fumecheng-13732	70	13	2	2	NUM
fumecheng-13732	70	14	2	2	NUM
fumecheng-13732	70	15	w	w	NOUN
fumecheng-13732	70	16	w	w	PROPN
fumecheng-13732	70	17	m	m	PROPN
fumecheng-13732	70	18	w	w	NOUN
fumecheng-13732	70	19	h	h	PROPN
fumecheng-13732	70	20	+	+	CCONJ
fumecheng-13732	71	1	+	+	CCONJ
fumecheng-13732	71	2	−	−	NOUN
fumecheng-13732	71	3	=	=	SYM
fumecheng-13732	71	4	(	(	PUNCT
fumecheng-13732	71	5	4	4	NUM
fumecheng-13732	71	6	)	)	PUNCT
fumecheng-13732	71	7	where	where	SCONJ
fumecheng-13732	71	8	h	h	NOUN
fumecheng-13732	71	9	is	be	AUX
fumecheng-13732	71	10	the	the	DET
fumecheng-13732	71	11	hamilton	hamilton	PROPN
fumecheng-13732	71	12	invariant	invariant	PROPN
fumecheng-13732	71	13	,	,	PUNCT
fumecheng-13732	71	14	it	it	PRON
fumecheng-13732	71	15	can	can	AUX
fumecheng-13732	71	16	be	be	AUX
fumecheng-13732	71	17	calculated	calculate	VERB
fumecheng-13732	71	18	by	by	ADP
fumecheng-13732	71	19	the	the	DET
fumecheng-13732	71	20	zero	zero	NUM
fumecheng-13732	71	21	initial	initial	ADJ
fumecheng-13732	71	22	conditions	condition	NOUN
fumecheng-13732	71	23	,	,	PUNCT
fumecheng-13732	71	24	and	and	CCONJ
fumecheng-13732	71	25	it	it	PRON
fumecheng-13732	71	26	results	result	VERB
fumecheng-13732	71	27	in	in	ADP
fumecheng-13732	71	28	h=0	h=0	PROPN
fumecheng-13732	71	29	,	,	PUNCT
fumecheng-13732	71	30	so	so	SCONJ
fumecheng-13732	71	31	we	we	PRON
fumecheng-13732	71	32	have	have	VERB
fumecheng-13732	71	33	2	2	NUM
fumecheng-13732	71	34	21	21	NUM
fumecheng-13732	71	35	1	1	NUM
fumecheng-13732	71	36	ln(1	ln(1	NOUN
fumecheng-13732	71	37	)	)	PUNCT
fumecheng-13732	71	38	0	0	NUM
fumecheng-13732	72	1	2	2	NUM
fumecheng-13732	72	2	2	2	NUM
fumecheng-13732	72	3	w	w	NOUN
fumecheng-13732	72	4	w	w	NOUN
fumecheng-13732	72	5	m	m	VERB
fumecheng-13732	72	6	w	w	NOUN
fumecheng-13732	73	1	+	+	CCONJ
fumecheng-13732	74	1	+	+	CCONJ
fumecheng-13732	74	2	−	−	NOUN
fumecheng-13732	74	3	=	=	SYM
fumecheng-13732	74	4	(	(	PUNCT
fumecheng-13732	74	5	5	5	NUM
fumecheng-13732	74	6	)	)	PUNCT
fumecheng-13732	74	7	652	652	NUM
fumecheng-13732	74	8	j.h	j.h	PROPN
fumecheng-13732	74	9	.	.	PUNCT
fumecheng-13732	75	1	he	he	PRON
fumecheng-13732	75	2	,	,	PUNCT
fumecheng-13732	75	3	j.	j.	PROPN
fumecheng-13732	75	4	ma	ma	PROPN
fumecheng-13732	75	5	,	,	PUNCT
fumecheng-13732	75	6	a.a	a.a	PROPN
fumecheng-13732	75	7	.	.	PROPN
fumecheng-13732	75	8	alsolam	alsolam	PROPN
fumecheng-13732	75	9	,	,	PUNCT
fumecheng-13732	75	10	c.h	c.h	PROPN
fumecheng-13732	75	11	.	.	PUNCT
fumecheng-13732	76	1	he	he	PRON
fumecheng-13732	76	2	we	we	PRON
fumecheng-13732	76	3	introduce	introduce	VERB
fumecheng-13732	76	4	a	a	DET
fumecheng-13732	76	5	new	new	ADJ
fumecheng-13732	76	6	variable	variable	NOUN
fumecheng-13732	76	7	,	,	PUNCT
fumecheng-13732	76	8	k	k	PROPN
fumecheng-13732	76	9	,	,	PUNCT
fumecheng-13732	76	10	defined	define	VERB
fumecheng-13732	76	11	as	as	ADP
fumecheng-13732	76	12	:	:	PUNCT
fumecheng-13732	76	13	21	21	NUM
fumecheng-13732	76	14	2	2	NUM
fumecheng-13732	76	15	k	k	NOUN
fumecheng-13732	76	16	w=	w=	PROPN
fumecheng-13732	76	17	.	.	PUNCT
fumecheng-13732	77	1	(	(	PUNCT
fumecheng-13732	77	2	6	6	X
fumecheng-13732	77	3	)	)	PUNCT
fumecheng-13732	77	4	the	the	DET
fumecheng-13732	77	5	new	new	ADJ
fumecheng-13732	77	6	variable	variable	NOUN
fumecheng-13732	77	7	is	be	AUX
fumecheng-13732	77	8	the	the	DET
fumecheng-13732	77	9	kinetic	kinetic	ADJ
fumecheng-13732	77	10	energy	energy	NOUN
fumecheng-13732	77	11	,	,	PUNCT
fumecheng-13732	77	12	from	from	ADP
fumecheng-13732	77	13	eq	eq	ADP
fumecheng-13732	77	14	.	.	PUNCT
fumecheng-13732	78	1	(	(	PUNCT
fumecheng-13732	78	2	5	5	NUM
fumecheng-13732	78	3	)	)	PUNCT
fumecheng-13732	78	4	,	,	PUNCT
fumecheng-13732	78	5	we	we	PRON
fumecheng-13732	78	6	have	have	VERB
fumecheng-13732	78	7	:	:	PUNCT
fumecheng-13732	79	1	21	21	NUM
fumecheng-13732	79	2	ln(1	ln(1	NOUN
fumecheng-13732	79	3	)	)	PUNCT
fumecheng-13732	79	4	2	2	NUM
fumecheng-13732	79	5	k	k	NOUN
fumecheng-13732	79	6	w	w	PROPN
fumecheng-13732	79	7	m	m	VERB
fumecheng-13732	79	8	w=	w=	NOUN
fumecheng-13732	79	9	−	−	PROPN
fumecheng-13732	79	10	−	−	PROPN
fumecheng-13732	79	11	−	−	PROPN
fumecheng-13732	79	12	.	.	PUNCT
fumecheng-13732	80	1	(	(	PUNCT
fumecheng-13732	80	2	7	7	X
fumecheng-13732	80	3	)	)	PUNCT
fumecheng-13732	80	4	for	for	ADP
fumecheng-13732	80	5	small	small	ADJ
fumecheng-13732	80	6	displacement	displacement	NOUN
fumecheng-13732	80	7	,	,	PUNCT
fumecheng-13732	80	8	eq	eq	NOUN
fumecheng-13732	80	9	.	.	PUNCT
fumecheng-13732	81	1	(	(	PUNCT
fumecheng-13732	81	2	7	7	X
fumecheng-13732	81	3	)	)	PUNCT
fumecheng-13732	81	4	can	can	AUX
fumecheng-13732	81	5	be	be	AUX
fumecheng-13732	81	6	approximately	approximately	ADV
fumecheng-13732	81	7	expressed	express	VERB
fumecheng-13732	81	8	as	as	ADP
fumecheng-13732	81	9	2	2	NUM
fumecheng-13732	81	10	2	2	NUM
fumecheng-13732	81	11	2	2	NUM
fumecheng-13732	81	12	21	21	NUM
fumecheng-13732	81	13	1	1	NUM
fumecheng-13732	81	14	1	1	NUM
fumecheng-13732	81	15	1	1	NUM
fumecheng-13732	81	16	(	(	PUNCT
fumecheng-13732	81	17	)	)	PUNCT
fumecheng-13732	81	18	2	2	NUM
fumecheng-13732	81	19	2	2	NUM
fumecheng-13732	81	20	2	2	NUM
fumecheng-13732	81	21	2	2	NUM
fumecheng-13732	81	22	k	k	NOUN
fumecheng-13732	81	23	w	w	PROPN
fumecheng-13732	81	24	m	m	PROPN
fumecheng-13732	81	25	w	w	PROPN
fumecheng-13732	81	26	w	w	PROPN
fumecheng-13732	81	27	w	w	PROPN
fumecheng-13732	81	28	mw	mw	X
fumecheng-13732	81	29	mw=	mw=	NOUN
fumecheng-13732	81	30	−	−	PROPN
fumecheng-13732	81	31	−	−	PROPN
fumecheng-13732	81	32	−	−	NOUN
fumecheng-13732	82	1	−	−	PROPN
fumecheng-13732	82	2	=	=	SYM
fumecheng-13732	83	1	−	−	PROPN
fumecheng-13732	84	1	+	+	CCONJ
fumecheng-13732	84	2	+	+	CCONJ
fumecheng-13732	84	3	,	,	PUNCT
fumecheng-13732	84	4	(	(	PUNCT
fumecheng-13732	84	5	8)	8)	NUM
fumecheng-13732	84	6	or	or	CCONJ
fumecheng-13732	84	7	22	22	NUM
fumecheng-13732	84	8	4	4	NUM
fumecheng-13732	84	9	8	8	NUM
fumecheng-13732	84	10	(	(	PUNCT
fumecheng-13732	84	11	1	1	NUM
fumecheng-13732	84	12	)	)	PUNCT
fumecheng-13732	84	13	2(1	2(1	NUM
fumecheng-13732	84	14	)	)	PUNCT
fumecheng-13732	85	1	m	m	VERB
fumecheng-13732	85	2	m	m	VERB
fumecheng-13732	85	3	k	k	X
fumecheng-13732	85	4	m	m	VERB
fumecheng-13732	85	5	w	w	NOUN
fumecheng-13732	85	6	m	m	PROPN
fumecheng-13732	85	7	+	+	CCONJ
fumecheng-13732	86	1	−	−	PROPN
fumecheng-13732	86	2	−	−	PROPN
fumecheng-13732	86	3	=	=	SYM
fumecheng-13732	86	4	−	−	PROPN
fumecheng-13732	86	5	.	.	PUNCT
fumecheng-13732	87	1	(	(	PUNCT
fumecheng-13732	87	2	9	9	NUM
fumecheng-13732	87	3	)	)	PUNCT
fumecheng-13732	87	4	eq	eq	NOUN
fumecheng-13732	87	5	.	.	PUNCT
fumecheng-13732	88	1	(	(	PUNCT
fumecheng-13732	88	2	9	9	NUM
fumecheng-13732	88	3	)	)	PUNCT
fumecheng-13732	88	4	implies	imply	VERB
fumecheng-13732	88	5	that	that	SCONJ
fumecheng-13732	88	6	the	the	DET
fumecheng-13732	88	7	displacement	displacement	NOUN
fumecheng-13732	88	8	(	(	PUNCT
fumecheng-13732	88	9	w	w	NOUN
fumecheng-13732	88	10	)	)	PUNCT
fumecheng-13732	88	11	is	be	AUX
fumecheng-13732	88	12	a	a	DET
fumecheng-13732	88	13	function	function	NOUN
fumecheng-13732	88	14	of	of	ADP
fumecheng-13732	88	15	m	m	PROPN
fumecheng-13732	88	16	and	and	CCONJ
fumecheng-13732	88	17	k.	k.	PROPN
fumecheng-13732	89	1	3	3	X
fumecheng-13732	89	2	.	.	PUNCT
fumecheng-13732	89	3	criterion	criterion	NOUN
fumecheng-13732	89	4	for	for	ADP
fumecheng-13732	89	5	pull	pull	NOUN
fumecheng-13732	89	6	-	-	PUNCT
fumecheng-13732	89	7	in	in	ADP
fumecheng-13732	89	8	instability	instability	NOUN
fumecheng-13732	89	9	pull	pull	NOUN
fumecheng-13732	89	10	-	-	PUNCT
fumecheng-13732	89	11	in	in	ADP
fumecheng-13732	89	12	instability	instability	NOUN
fumecheng-13732	89	13	in	in	ADP
fumecheng-13732	89	14	mems	mem	NOUN
fumecheng-13732	89	15	refers	refer	VERB
fumecheng-13732	89	16	to	to	ADP
fumecheng-13732	89	17	a	a	DET
fumecheng-13732	89	18	phenomenon	phenomenon	NOUN
fumecheng-13732	89	19	where	where	SCONJ
fumecheng-13732	89	20	an	an	DET
fumecheng-13732	89	21	electrostatically	electrostatically	ADV
fumecheng-13732	89	22	actuated	actuate	VERB
fumecheng-13732	89	23	mems	mem	NOUN
fumecheng-13732	89	24	device	device	NOUN
fumecheng-13732	89	25	collapses	collapse	VERB
fumecheng-13732	89	26	or	or	CCONJ
fumecheng-13732	89	27	snaps	snap	VERB
fumecheng-13732	89	28	to	to	ADP
fumecheng-13732	89	29	a	a	DET
fumecheng-13732	89	30	new	new	ADJ
fumecheng-13732	89	31	stable	stable	ADJ
fumecheng-13732	89	32	state	state	NOUN
fumecheng-13732	89	33	.	.	PUNCT
fumecheng-13732	90	1	this	this	PRON
fumecheng-13732	90	2	occurs	occur	VERB
fumecheng-13732	90	3	due	due	ADP
fumecheng-13732	90	4	to	to	ADP
fumecheng-13732	90	5	the	the	DET
fumecheng-13732	90	6	interaction	interaction	NOUN
fumecheng-13732	90	7	between	between	ADP
fumecheng-13732	90	8	electrostatic	electrostatic	ADJ
fumecheng-13732	90	9	forces	force	NOUN
fumecheng-13732	90	10	and	and	CCONJ
fumecheng-13732	90	11	mechanical	mechanical	ADJ
fumecheng-13732	90	12	restoring	restore	VERB
fumecheng-13732	90	13	forces	force	NOUN
fumecheng-13732	90	14	.	.	PUNCT
fumecheng-13732	91	1	as	as	ADP
fumecheng-13732	91	2	the	the	DET
fumecheng-13732	91	3	applied	apply	VERB
fumecheng-13732	91	4	voltage	voltage	NOUN
fumecheng-13732	91	5	increases	increase	NOUN
fumecheng-13732	91	6	,	,	PUNCT
fumecheng-13732	91	7	the	the	DET
fumecheng-13732	91	8	electrostatic	electrostatic	ADJ
fumecheng-13732	91	9	force	force	NOUN
fumecheng-13732	91	10	overcomes	overcome	VERB
fumecheng-13732	91	11	the	the	DET
fumecheng-13732	91	12	mechanical	mechanical	ADJ
fumecheng-13732	91	13	restoring	restore	VERB
fumecheng-13732	91	14	force	force	NOUN
fumecheng-13732	91	15	,	,	PUNCT
fumecheng-13732	91	16	leading	lead	VERB
fumecheng-13732	91	17	to	to	ADP
fumecheng-13732	91	18	instability	instability	NOUN
fumecheng-13732	91	19	.	.	PUNCT
fumecheng-13732	92	1	it	it	PRON
fumecheng-13732	92	2	can	can	AUX
fumecheng-13732	92	3	cause	cause	VERB
fumecheng-13732	92	4	failure	failure	NOUN
fumecheng-13732	92	5	in	in	ADP
fumecheng-13732	92	6	mems	mems	ADJ
fumecheng-13732	92	7	devices	device	NOUN
fumecheng-13732	92	8	and	and	CCONJ
fumecheng-13732	92	9	is	be	AUX
fumecheng-13732	92	10	an	an	DET
fumecheng-13732	92	11	important	important	ADJ
fumecheng-13732	92	12	consideration	consideration	NOUN
fumecheng-13732	92	13	in	in	ADP
fumecheng-13732	92	14	their	their	PRON
fumecheng-13732	92	15	design	design	NOUN
fumecheng-13732	92	16	.	.	PUNCT
fumecheng-13732	93	1	understanding	understanding	NOUN
fumecheng-13732	93	2	and	and	CCONJ
fumecheng-13732	93	3	predicting	predict	VERB
fumecheng-13732	93	4	pull	pull	NOUN
fumecheng-13732	93	5	-	-	PUNCT
fumecheng-13732	93	6	in	in	ADP
fumecheng-13732	93	7	instability	instability	NOUN
fumecheng-13732	93	8	is	be	AUX
fumecheng-13732	93	9	crucial	crucial	ADJ
fumecheng-13732	93	10	for	for	ADP
fumecheng-13732	93	11	ensuring	ensure	VERB
fumecheng-13732	93	12	the	the	DET
fumecheng-13732	93	13	reliable	reliable	ADJ
fumecheng-13732	93	14	operation	operation	NOUN
fumecheng-13732	93	15	of	of	ADP
fumecheng-13732	93	16	mems	mem	NOUN
fumecheng-13732	93	17	.	.	PUNCT
fumecheng-13732	94	1	the	the	DET
fumecheng-13732	94	2	criterion	criterion	NOUN
fumecheng-13732	94	3	for	for	ADP
fumecheng-13732	94	4	pull	pull	NOUN
fumecheng-13732	94	5	-	-	PUNCT
fumecheng-13732	94	6	in	in	ADP
fumecheng-13732	94	7	instability	instability	NOUN
fumecheng-13732	94	8	in	in	ADP
fumecheng-13732	94	9	mems	mems	PROPN
fumecheng-13732	94	10	is	be	AUX
fumecheng-13732	94	11	a	a	DET
fumecheng-13732	94	12	key	key	ADJ
fumecheng-13732	94	13	aspect	aspect	NOUN
fumecheng-13732	94	14	in	in	ADP
fumecheng-13732	94	15	understanding	understanding	NOUN
fumecheng-13732	94	16	and	and	CCONJ
fumecheng-13732	94	17	designing	design	VERB
fumecheng-13732	94	18	these	these	DET
fumecheng-13732	94	19	devices	device	NOUN
fumecheng-13732	94	20	.	.	PUNCT
fumecheng-13732	95	1	as	as	SCONJ
fumecheng-13732	95	2	mentioned	mention	VERB
fumecheng-13732	95	3	earlier	early	ADV
fumecheng-13732	95	4	,	,	PUNCT
fumecheng-13732	95	5	the	the	DET
fumecheng-13732	95	6	criterion	criterion	NOUN
fumecheng-13732	95	7	for	for	ADP
fumecheng-13732	95	8	pull	pull	NOUN
fumecheng-13732	95	9	-	-	PUNCT
fumecheng-13732	95	10	in	in	ADP
fumecheng-13732	95	11	instability	instability	NOUN
fumecheng-13732	95	12	is	be	AUX
fumecheng-13732	95	13	that	that	SCONJ
fumecheng-13732	95	14	when	when	SCONJ
fumecheng-13732	95	15	the	the	DET
fumecheng-13732	95	16	kinetic	kinetic	ADJ
fumecheng-13732	95	17	energy	energy	NOUN
fumecheng-13732	95	18	and	and	CCONJ
fumecheng-13732	95	19	the	the	DET
fumecheng-13732	95	20	accelerated	accelerated	ADJ
fumecheng-13732	95	21	speed	speed	NOUN
fumecheng-13732	95	22	become	become	VERB
fumecheng-13732	95	23	zero	zero	NUM
fumecheng-13732	95	24	simultaneously	simultaneously	ADV
fumecheng-13732	95	25	[	[	X
fumecheng-13732	95	26	16	16	NUM
fumecheng-13732	95	27	]	]	PUNCT
fumecheng-13732	95	28	.	.	PUNCT
fumecheng-13732	96	1	this	this	PRON
fumecheng-13732	96	2	means	mean	VERB
fumecheng-13732	96	3	that	that	SCONJ
fumecheng-13732	96	4	at	at	ADP
fumecheng-13732	96	5	this	this	DET
fumecheng-13732	96	6	point	point	NOUN
fumecheng-13732	96	7	,	,	PUNCT
fumecheng-13732	96	8	the	the	DET
fumecheng-13732	96	9	device	device	NOUN
fumecheng-13732	96	10	is	be	AUX
fumecheng-13732	96	11	in	in	ADP
fumecheng-13732	96	12	a	a	DET
fumecheng-13732	96	13	state	state	NOUN
fumecheng-13732	96	14	of	of	ADP
fumecheng-13732	96	15	unstable	unstable	ADJ
fumecheng-13732	96	16	equilibrium	equilibrium	NOUN
fumecheng-13732	96	17	and	and	CCONJ
fumecheng-13732	96	18	is	be	AUX
fumecheng-13732	96	19	likely	likely	ADJ
fumecheng-13732	96	20	to	to	PART
fumecheng-13732	96	21	collapse	collapse	VERB
fumecheng-13732	96	22	or	or	CCONJ
fumecheng-13732	96	23	snap	snap	VERB
fumecheng-13732	96	24	to	to	ADP
fumecheng-13732	96	25	a	a	DET
fumecheng-13732	96	26	new	new	ADJ
fumecheng-13732	96	27	stable	stable	ADJ
fumecheng-13732	96	28	state	state	NOUN
fumecheng-13732	96	29	.	.	PUNCT
fumecheng-13732	97	1	this	this	DET
fumecheng-13732	97	2	criterion	criterion	NOUN
fumecheng-13732	97	3	provides	provide	VERB
fumecheng-13732	97	4	a	a	DET
fumecheng-13732	97	5	quantitative	quantitative	ADJ
fumecheng-13732	97	6	measure	measure	NOUN
fumecheng-13732	97	7	for	for	SCONJ
fumecheng-13732	97	8	engineers	engineer	NOUN
fumecheng-13732	97	9	to	to	PART
fumecheng-13732	97	10	determine	determine	VERB
fumecheng-13732	97	11	when	when	SCONJ
fumecheng-13732	97	12	pull	pull	VERB
fumecheng-13732	97	13	-	-	PUNCT
fumecheng-13732	97	14	in	in	ADP
fumecheng-13732	97	15	instability	instability	NOUN
fumecheng-13732	97	16	may	may	AUX
fumecheng-13732	97	17	occur	occur	VERB
fumecheng-13732	97	18	.	.	PUNCT
fumecheng-13732	98	1	for	for	ADP
fumecheng-13732	98	2	example	example	NOUN
fumecheng-13732	98	3	,	,	PUNCT
fumecheng-13732	98	4	in	in	ADP
fumecheng-13732	98	5	the	the	DET
fumecheng-13732	98	6	design	design	NOUN
fumecheng-13732	98	7	of	of	ADP
fumecheng-13732	98	8	a	a	DET
fumecheng-13732	98	9	mems	mem	NOUN
fumecheng-13732	98	10	actuator	actuator	NOUN
fumecheng-13732	98	11	,	,	PUNCT
fumecheng-13732	98	12	engineers	engineer	NOUN
fumecheng-13732	98	13	can	can	AUX
fumecheng-13732	98	14	use	use	VERB
fumecheng-13732	98	15	this	this	DET
fumecheng-13732	98	16	criterion	criterion	NOUN
fumecheng-13732	98	17	to	to	PART
fumecheng-13732	98	18	calculate	calculate	VERB
fumecheng-13732	98	19	the	the	DET
fumecheng-13732	98	20	maximum	maximum	ADJ
fumecheng-13732	98	21	allowable	allowable	ADJ
fumecheng-13732	98	22	voltage	voltage	NOUN
fumecheng-13732	98	23	that	that	PRON
fumecheng-13732	98	24	can	can	AUX
fumecheng-13732	98	25	be	be	AUX
fumecheng-13732	98	26	applied	apply	VERB
fumecheng-13732	98	27	before	before	ADP
fumecheng-13732	98	28	pull	pull	NOUN
fumecheng-13732	98	29	-	-	PUNCT
fumecheng-13732	98	30	in	in	ADP
fumecheng-13732	98	31	instability	instability	NOUN
fumecheng-13732	98	32	occurs	occur	VERB
fumecheng-13732	98	33	.	.	PUNCT
fumecheng-13732	99	1	by	by	ADP
fumecheng-13732	99	2	understanding	understand	VERB
fumecheng-13732	99	3	this	this	DET
fumecheng-13732	99	4	criterion	criterion	NOUN
fumecheng-13732	99	5	,	,	PUNCT
fumecheng-13732	99	6	engineers	engineer	NOUN
fumecheng-13732	99	7	can	can	AUX
fumecheng-13732	99	8	design	design	VERB
fumecheng-13732	99	9	mems	mem	NOUN
fumecheng-13732	99	10	devices	device	NOUN
fumecheng-13732	99	11	that	that	PRON
fumecheng-13732	99	12	are	be	AUX
fumecheng-13732	99	13	more	more	ADV
fumecheng-13732	99	14	stable	stable	ADJ
fumecheng-13732	99	15	and	and	CCONJ
fumecheng-13732	99	16	reliable	reliable	ADJ
fumecheng-13732	99	17	,	,	PUNCT
fumecheng-13732	99	18	and	and	CCONJ
fumecheng-13732	99	19	avoid	avoid	VERB
fumecheng-13732	99	20	potential	potential	ADJ
fumecheng-13732	99	21	failures	failure	NOUN
fumecheng-13732	99	22	due	due	ADP
fumecheng-13732	99	23	to	to	ADP
fumecheng-13732	99	24	pull	pull	VERB
fumecheng-13732	99	25	-	-	PUNCT
fumecheng-13732	99	26	in	in	ADP
fumecheng-13732	99	27	instability	instability	NOUN
fumecheng-13732	99	28	.	.	PUNCT
fumecheng-13732	100	1	the	the	DET
fumecheng-13732	100	2	criterion	criterion	NOUN
fumecheng-13732	100	3	for	for	ADP
fumecheng-13732	100	4	pull	pull	NOUN
fumecheng-13732	100	5	-	-	PUNCT
fumecheng-13732	100	6	in	in	ADP
fumecheng-13732	100	7	instability	instability	NOUN
fumecheng-13732	100	8	is	be	AUX
fumecheng-13732	100	9	that	that	SCONJ
fumecheng-13732	100	10	when	when	SCONJ
fumecheng-13732	100	11	the	the	DET
fumecheng-13732	100	12	kinetic	kinetic	ADJ
fumecheng-13732	100	13	energy	energy	NOUN
fumecheng-13732	100	14	and	and	CCONJ
fumecheng-13732	100	15	the	the	DET
fumecheng-13732	100	16	accelerated	accelerated	ADJ
fumecheng-13732	100	17	speed	speed	NOUN
fumecheng-13732	100	18	become	become	VERB
fumecheng-13732	100	19	zero	zero	NUM
fumecheng-13732	100	20	simultaneously	simultaneously	ADV
fumecheng-13732	100	21	.	.	PUNCT
fumecheng-13732	101	1	according	accord	VERB
fumecheng-13732	101	2	to	to	ADP
fumecheng-13732	101	3	eq	eq	PROPN
fumecheng-13732	101	4	.	.	PUNCT
fumecheng-13732	102	1	(	(	PUNCT
fumecheng-13732	102	2	1	1	NUM
fumecheng-13732	102	3	)	)	PUNCT
fumecheng-13732	102	4	and	and	CCONJ
fumecheng-13732	102	5	eq	eq	NOUN
fumecheng-13732	102	6	.	.	PUNCT
fumecheng-13732	103	1	(	(	PUNCT
fumecheng-13732	103	2	7	7	NUM
fumecheng-13732	103	3	)	)	PUNCT
fumecheng-13732	103	4	,	,	PUNCT
fumecheng-13732	103	5	we	we	PRON
fumecheng-13732	103	6	have	have	VERB
fumecheng-13732	103	7	:	:	PUNCT
fumecheng-13732	103	8	0	0	NUM
fumecheng-13732	103	9	1	1	NUM
fumecheng-13732	103	10	m	m	NOUN
fumecheng-13732	103	11	w	w	PROPN
fumecheng-13732	103	12	w	w	NOUN
fumecheng-13732	103	13	−	−	PROPN
fumecheng-13732	103	14	=	=	SYM
fumecheng-13732	103	15	−	−	PROPN
fumecheng-13732	103	16	(	(	PUNCT
fumecheng-13732	103	17	10	10	NUM
fumecheng-13732	103	18	)	)	PUNCT
fumecheng-13732	103	19	variational	variational	ADJ
fumecheng-13732	103	20	approach	approach	NOUN
fumecheng-13732	103	21	to	to	ADP
fumecheng-13732	103	22	micro	micro	ADJ
fumecheng-13732	103	23	-	-	ADJ
fumecheng-13732	103	24	electro	electro	ADJ
fumecheng-13732	103	25	-	-	PUNCT
fumecheng-13732	103	26	mechanical	mechanical	ADJ
fumecheng-13732	103	27	systems	system	NOUN
fumecheng-13732	104	1	653	653	NUM
fumecheng-13732	104	2	21	21	NUM
fumecheng-13732	104	3	ln(1	ln(1	NOUN
fumecheng-13732	104	4	)	)	PUNCT
fumecheng-13732	104	5	0	0	NUM
fumecheng-13732	104	6	2	2	NUM
fumecheng-13732	104	7	w	w	PROPN
fumecheng-13732	104	8	m	m	VERB
fumecheng-13732	104	9	w−	w−	NOUN
fumecheng-13732	104	10	−	−	NOUN
fumecheng-13732	104	11	−	−	PROPN
fumecheng-13732	104	12	=	=	SYM
fumecheng-13732	104	13	(	(	PUNCT
fumecheng-13732	104	14	11	11	NUM
fumecheng-13732	104	15	)	)	PUNCT
fumecheng-13732	104	16	solving	solve	VERB
fumecheng-13732	104	17	eqs	eqs	PROPN
fumecheng-13732	104	18	.	.	PUNCT
fumecheng-13732	105	1	(	(	PUNCT
fumecheng-13732	105	2	10	10	NUM
fumecheng-13732	105	3	)	)	PUNCT
fumecheng-13732	105	4	and	and	CCONJ
fumecheng-13732	105	5	(	(	PUNCT
fumecheng-13732	105	6	11	11	NUM
fumecheng-13732	105	7	)	)	PUNCT
fumecheng-13732	105	8	simultaneously	simultaneously	ADV
fumecheng-13732	105	9	,	,	PUNCT
fumecheng-13732	105	10	we	we	PRON
fumecheng-13732	105	11	find	find	VERB
fumecheng-13732	105	12	the	the	DET
fumecheng-13732	105	13	threshold	threshold	NOUN
fumecheng-13732	105	14	values	value	NOUN
fumecheng-13732	105	15	of	of	ADP
fumecheng-13732	105	16	the	the	DET
fumecheng-13732	105	17	displacement	displacement	NOUN
fumecheng-13732	105	18	and	and	CCONJ
fumecheng-13732	105	19	the	the	DET
fumecheng-13732	105	20	voltage	voltage	NOUN
fumecheng-13732	105	21	,	,	PUNCT
fumecheng-13732	105	22	*	*	PUNCT
fumecheng-13732	106	1	0.7153	0.7153	NUM
fumecheng-13732	106	2	*	*	PUNCT
fumecheng-13732	106	3	0.2036	0.2036	NUM
fumecheng-13732	106	4	w	w	NOUN
fumecheng-13732	106	5	m	m	NOUN
fumecheng-13732	106	6	=	=	NOUN
fumecheng-13732	106	7			ADV
fumecheng-13732	106	8			NOUN
fumecheng-13732	106	9	=	=	SYM
fumecheng-13732	106	10			PROPN
fumecheng-13732	106	11	(	(	PUNCT
fumecheng-13732	106	12	12	12	NUM
fumecheng-13732	106	13	)	)	PUNCT
fumecheng-13732	106	14	that	that	PRON
fumecheng-13732	106	15	implies	imply	VERB
fumecheng-13732	106	16	that	that	SCONJ
fumecheng-13732	106	17	in	in	ADP
fumecheng-13732	106	18	the	the	DET
fumecheng-13732	106	19	event	event	NOUN
fumecheng-13732	106	20	that	that	SCONJ
fumecheng-13732	106	21	the	the	DET
fumecheng-13732	106	22	value	value	NOUN
fumecheng-13732	106	23	of	of	ADP
fumecheng-13732	106	24	w	w	NOUN
fumecheng-13732	106	25	is	be	AUX
fumecheng-13732	106	26	greater	great	ADJ
fumecheng-13732	106	27	than	than	ADP
fumecheng-13732	106	28	w	w	PROPN
fumecheng-13732	106	29	*	*	PUNCT
fumecheng-13732	106	30	or	or	CCONJ
fumecheng-13732	106	31	the	the	DET
fumecheng-13732	106	32	value	value	NOUN
fumecheng-13732	106	33	of	of	ADP
fumecheng-13732	106	34	m	m	NOUN
fumecheng-13732	106	35	is	be	AUX
fumecheng-13732	106	36	greater	great	ADJ
fumecheng-13732	106	37	than	than	ADP
fumecheng-13732	106	38	m	m	PROPN
fumecheng-13732	106	39	*	*	PUNCT
fumecheng-13732	106	40	,	,	PUNCT
fumecheng-13732	106	41	the	the	DET
fumecheng-13732	106	42	phenomenon	phenomenon	NOUN
fumecheng-13732	106	43	of	of	ADP
fumecheng-13732	106	44	pull	pull	NOUN
fumecheng-13732	106	45	-	-	PUNCT
fumecheng-13732	106	46	in	in	ADP
fumecheng-13732	106	47	instability	instability	NOUN
fumecheng-13732	106	48	takes	take	VERB
fumecheng-13732	106	49	place	place	NOUN
fumecheng-13732	106	50	,	,	PUNCT
fumecheng-13732	106	51	w	w	PROPN
fumecheng-13732	106	52	*	*	PROPN
fumecheng-13732	106	53	is	be	AUX
fumecheng-13732	106	54	called	call	VERB
fumecheng-13732	106	55	as	as	ADP
fumecheng-13732	106	56	the	the	DET
fumecheng-13732	106	57	pullin	pullin	PROPN
fumecheng-13732	106	58	displacement	displacement	NOUN
fumecheng-13732	106	59	,	,	PUNCT
fumecheng-13732	106	60	and	and	CCONJ
fumecheng-13732	106	61	m	m	PROPN
fumecheng-13732	106	62	*	*	PROPN
fumecheng-13732	106	63	is	be	AUX
fumecheng-13732	106	64	the	the	DET
fumecheng-13732	106	65	pull	pull	VERB
fumecheng-13732	106	66	-	-	PUNCT
fumecheng-13732	106	67	in	in	ADP
fumecheng-13732	106	68	voltage	voltage	NOUN
fumecheng-13732	106	69	.	.	PUNCT
fumecheng-13732	107	1	this	this	DET
fumecheng-13732	107	2	criterion	criterion	NOUN
fumecheng-13732	107	3	for	for	ADP
fumecheng-13732	107	4	pull	pull	NOUN
fumecheng-13732	107	5	-	-	PUNCT
fumecheng-13732	107	6	in	in	ADP
fumecheng-13732	107	7	instability	instability	NOUN
fumecheng-13732	107	8	is	be	AUX
fumecheng-13732	107	9	highly	highly	ADV
fumecheng-13732	107	10	accurate	accurate	ADJ
fumecheng-13732	107	11	and	and	CCONJ
fumecheng-13732	107	12	extremely	extremely	ADV
fumecheng-13732	107	13	reliable	reliable	ADJ
fumecheng-13732	107	14	.	.	PUNCT
fumecheng-13732	108	1	the	the	DET
fumecheng-13732	108	2	accurate	accurate	ADJ
fumecheng-13732	108	3	determination	determination	NOUN
fumecheng-13732	108	4	of	of	ADP
fumecheng-13732	108	5	the	the	DET
fumecheng-13732	108	6	pull	pull	NOUN
fumecheng-13732	108	7	-	-	PUNCT
fumecheng-13732	108	8	in	in	ADP
fumecheng-13732	108	9	voltage	voltage	NOUN
fumecheng-13732	108	10	provides	provide	VERB
fumecheng-13732	108	11	a	a	DET
fumecheng-13732	108	12	valuable	valuable	ADJ
fumecheng-13732	108	13	benchmark	benchmark	NOUN
fumecheng-13732	108	14	for	for	ADP
fumecheng-13732	108	15	researchers	researcher	NOUN
fumecheng-13732	108	16	and	and	CCONJ
fumecheng-13732	108	17	engineers	engineer	NOUN
fumecheng-13732	108	18	working	work	VERB
fumecheng-13732	108	19	in	in	ADP
fumecheng-13732	108	20	the	the	DET
fumecheng-13732	108	21	field	field	NOUN
fumecheng-13732	108	22	of	of	ADP
fumecheng-13732	108	23	electrostatically	electrostatically	ADV
fumecheng-13732	108	24	actuated	actuate	VERB
fumecheng-13732	108	25	mems	mem	NOUN
fumecheng-13732	108	26	/	/	SYM
fumecheng-13732	108	27	nems	nem	NOUN
fumecheng-13732	108	28	.	.	PUNCT
fumecheng-13732	109	1	it	it	PRON
fumecheng-13732	109	2	allows	allow	VERB
fumecheng-13732	109	3	for	for	ADP
fumecheng-13732	109	4	a	a	DET
fumecheng-13732	109	5	more	more	ADV
fumecheng-13732	109	6	precise	precise	ADJ
fumecheng-13732	109	7	understanding	understanding	NOUN
fumecheng-13732	109	8	and	and	CCONJ
fumecheng-13732	109	9	prediction	prediction	NOUN
fumecheng-13732	109	10	of	of	ADP
fumecheng-13732	109	11	the	the	DET
fumecheng-13732	109	12	occurrence	occurrence	NOUN
fumecheng-13732	109	13	of	of	ADP
fumecheng-13732	109	14	pull	pull	NOUN
fumecheng-13732	109	15	-	-	PUNCT
fumecheng-13732	109	16	in	in	ADP
fumecheng-13732	109	17	instability	instability	NOUN
fumecheng-13732	109	18	,	,	PUNCT
fumecheng-13732	109	19	enabling	enable	VERB
fumecheng-13732	109	20	better	well	ADJ
fumecheng-13732	109	21	design	design	NOUN
fumecheng-13732	109	22	and	and	CCONJ
fumecheng-13732	109	23	optimization	optimization	NOUN
fumecheng-13732	109	24	of	of	ADP
fumecheng-13732	109	25	these	these	DET
fumecheng-13732	109	26	micro	micro	ADJ
fumecheng-13732	109	27	and	and	CCONJ
fumecheng-13732	109	28	nano	nano	NOUN
fumecheng-13732	109	29	devices	device	NOUN
fumecheng-13732	109	30	.	.	PUNCT
fumecheng-13732	110	1	with	with	ADP
fumecheng-13732	110	2	such	such	DET
fumecheng-13732	110	3	a	a	DET
fumecheng-13732	110	4	highly	highly	ADV
fumecheng-13732	110	5	accurate	accurate	ADJ
fumecheng-13732	110	6	criterion	criterion	NOUN
fumecheng-13732	110	7	,	,	PUNCT
fumecheng-13732	110	8	it	it	PRON
fumecheng-13732	110	9	becomes	become	VERB
fumecheng-13732	110	10	possible	possible	ADJ
fumecheng-13732	110	11	to	to	PART
fumecheng-13732	110	12	make	make	VERB
fumecheng-13732	110	13	more	more	ADV
fumecheng-13732	110	14	informed	informed	ADJ
fumecheng-13732	110	15	decisions	decision	NOUN
fumecheng-13732	110	16	regarding	regard	VERB
fumecheng-13732	110	17	the	the	DET
fumecheng-13732	110	18	design	design	NOUN
fumecheng-13732	110	19	parameters	parameter	NOUN
fumecheng-13732	110	20	and	and	CCONJ
fumecheng-13732	110	21	operating	operating	NOUN
fumecheng-13732	110	22	conditions	condition	NOUN
fumecheng-13732	110	23	to	to	PART
fumecheng-13732	110	24	avoid	avoid	VERB
fumecheng-13732	110	25	or	or	CCONJ
fumecheng-13732	110	26	manage	manage	VERB
fumecheng-13732	110	27	pull	pull	NOUN
fumecheng-13732	110	28	-	-	PUNCT
fumecheng-13732	110	29	in	in	ADP
fumecheng-13732	110	30	instability	instability	NOUN
fumecheng-13732	110	31	effectively	effectively	ADV
fumecheng-13732	110	32	.	.	PUNCT
fumecheng-13732	111	1	4	4	X
fumecheng-13732	111	2	.	.	X
fumecheng-13732	111	3	semi	semi	ADJ
fumecheng-13732	111	4	-	-	ADJ
fumecheng-13732	111	5	inverse	inverse	ADJ
fumecheng-13732	111	6	method	method	NOUN
fumecheng-13732	111	7	and	and	CCONJ
fumecheng-13732	111	8	a	a	DET
fumecheng-13732	111	9	new	new	ADJ
fumecheng-13732	111	10	variational	variational	ADJ
fumecheng-13732	111	11	formulation	formulation	NOUN
fumecheng-13732	111	12	for	for	ADP
fumecheng-13732	111	13	mems	mem	NOUN
fumecheng-13732	111	14	oscillator	oscillator	NOUN
fumecheng-13732	111	15	the	the	DET
fumecheng-13732	111	16	semi	semi	ADJ
fumecheng-13732	111	17	-	-	ADJ
fumecheng-13732	111	18	inverse	inverse	ADJ
fumecheng-13732	111	19	method	method	NOUN
fumecheng-13732	112	1	[	[	X
fumecheng-13732	112	2	25	25	NUM
fumecheng-13732	112	3	]	]	PUNCT
fumecheng-13732	112	4	is	be	AUX
fumecheng-13732	112	5	a	a	DET
fumecheng-13732	112	6	powerful	powerful	ADJ
fumecheng-13732	112	7	approach	approach	NOUN
fumecheng-13732	112	8	for	for	ADP
fumecheng-13732	112	9	establishing	establish	VERB
fumecheng-13732	112	10	a	a	DET
fumecheng-13732	112	11	variational	variational	ADJ
fumecheng-13732	112	12	principle	principle	NOUN
fumecheng-13732	112	13	.	.	PUNCT
fumecheng-13732	113	1	it	it	PRON
fumecheng-13732	113	2	offers	offer	VERB
fumecheng-13732	113	3	a	a	DET
fumecheng-13732	113	4	systematic	systematic	ADJ
fumecheng-13732	113	5	way	way	NOUN
fumecheng-13732	113	6	to	to	PART
fumecheng-13732	113	7	solve	solve	VERB
fumecheng-13732	113	8	complex	complex	ADJ
fumecheng-13732	113	9	problems	problem	NOUN
fumecheng-13732	113	10	in	in	ADP
fumecheng-13732	113	11	various	various	ADJ
fumecheng-13732	113	12	fields	field	NOUN
fumecheng-13732	113	13	,	,	PUNCT
fumecheng-13732	113	14	including	include	VERB
fumecheng-13732	113	15	mechanics	mechanic	NOUN
fumecheng-13732	113	16	and	and	CCONJ
fumecheng-13732	113	17	engineering	engineering	NOUN
fumecheng-13732	113	18	.	.	PUNCT
fumecheng-13732	114	1	though	though	SCONJ
fumecheng-13732	114	2	the	the	DET
fumecheng-13732	114	3	semi	semi	ADJ
fumecheng-13732	114	4	-	-	ADJ
fumecheng-13732	114	5	inverse	inverse	ADJ
fumecheng-13732	114	6	method	method	NOUN
fumecheng-13732	114	7	,	,	PUNCT
fumecheng-13732	114	8	many	many	ADJ
fumecheng-13732	114	9	new	new	ADJ
fumecheng-13732	114	10	variational	variational	ADJ
fumecheng-13732	114	11	formulations	formulation	NOUN
fumecheng-13732	114	12	were	be	AUX
fumecheng-13732	114	13	appeared	appear	VERB
fumecheng-13732	114	14	in	in	ADP
fumecheng-13732	114	15	literature	literature	NOUN
fumecheng-13732	114	16	for	for	ADP
fumecheng-13732	114	17	incompressible	incompressible	ADJ
fumecheng-13732	114	18	fluids	fluid	NOUN
fumecheng-13732	114	19	[	[	X
fumecheng-13732	114	20	26	26	NUM
fumecheng-13732	114	21	]	]	PUNCT
fumecheng-13732	114	22	,	,	PUNCT
fumecheng-13732	114	23	lubrication	lubrication	NOUN
fumecheng-13732	114	24	problems	problem	NOUN
fumecheng-13732	114	25	[	[	X
fumecheng-13732	114	26	27	27	NUM
fumecheng-13732	114	27	]	]	PUNCT
fumecheng-13732	114	28	,	,	PUNCT
fumecheng-13732	114	29	fractal	fractal	ADJ
fumecheng-13732	114	30	solitary	solitary	ADJ
fumecheng-13732	114	31	waves	wave	NOUN
fumecheng-13732	114	32	[	[	X
fumecheng-13732	114	33	28	28	NUM
fumecheng-13732	114	34	]	]	PUNCT
fumecheng-13732	114	35	and	and	CCONJ
fumecheng-13732	114	36	the	the	DET
fumecheng-13732	114	37	simplified	simplified	ADJ
fumecheng-13732	114	38	navier	navier	NOUN
fumecheng-13732	114	39	-	-	PUNCT
fumecheng-13732	114	40	stokes	stoke	NOUN
fumecheng-13732	114	41	equations	equation	NOUN
fumecheng-13732	114	42	[	[	X
fumecheng-13732	114	43	29	29	NUM
fumecheng-13732	114	44	]	]	PUNCT
fumecheng-13732	114	45	.	.	PUNCT
fumecheng-13732	115	1	we	we	PRON
fumecheng-13732	115	2	re	re	VERB
fumecheng-13732	115	3	-	-	VERB
fumecheng-13732	115	4	write	write	VERB
fumecheng-13732	115	5	eq	eq	X
fumecheng-13732	115	6	.	.	PUNCT
fumecheng-13732	116	1	(	(	PUNCT
fumecheng-13732	116	2	1	1	X
fumecheng-13732	116	3	)	)	PUNCT
fumecheng-13732	116	4	in	in	ADP
fumecheng-13732	116	5	the	the	DET
fumecheng-13732	116	6	following	follow	VERB
fumecheng-13732	116	7	form	form	NOUN
fumecheng-13732	116	8	:	:	PUNCT
fumecheng-13732	116	9	2	2	NUM
fumecheng-13732	116	10	0w	0w	NOUN
fumecheng-13732	116	11	w	w	PROPN
fumecheng-13732	116	12	w	w	PROPN
fumecheng-13732	116	13	w	w	PROPN
fumecheng-13732	116	14	w	w	PROPN
fumecheng-13732	116	15	m	m	PROPN
fumecheng-13732	116	16	+	+	PROPN
fumecheng-13732	117	1	−	−	PROPN
fumecheng-13732	117	2	−	−	PROPN
fumecheng-13732	117	3	−	−	PROPN
fumecheng-13732	118	1	=	=	SYM
fumecheng-13732	118	2	(	(	PUNCT
fumecheng-13732	118	3	13	13	NUM
fumecheng-13732	118	4	)	)	PUNCT
fumecheng-13732	118	5	the	the	DET
fumecheng-13732	118	6	semi	semi	ADJ
fumecheng-13732	118	7	-	-	ADJ
fumecheng-13732	118	8	inverse	inverse	ADJ
fumecheng-13732	118	9	method	method	NOUN
fumecheng-13732	118	10	commences	commence	VERB
fumecheng-13732	118	11	with	with	ADP
fumecheng-13732	118	12	the	the	DET
fumecheng-13732	118	13	formulation	formulation	NOUN
fumecheng-13732	118	14	of	of	ADP
fumecheng-13732	118	15	an	an	DET
fumecheng-13732	118	16	informed	informed	ADJ
fumecheng-13732	118	17	hypothesis	hypothesis	NOUN
fumecheng-13732	118	18	regarding	regard	VERB
fumecheng-13732	118	19	the	the	DET
fumecheng-13732	118	20	form	form	NOUN
fumecheng-13732	118	21	of	of	ADP
fumecheng-13732	118	22	the	the	DET
fumecheng-13732	118	23	variational	variational	ADJ
fumecheng-13732	118	24	formulation	formulation	NOUN
fumecheng-13732	118	25	.	.	PUNCT
fumecheng-13732	119	1	based	base	VERB
fumecheng-13732	119	2	on	on	ADP
fumecheng-13732	119	3	physical	physical	ADJ
fumecheng-13732	119	4	intuition	intuition	NOUN
fumecheng-13732	119	5	or	or	CCONJ
fumecheng-13732	119	6	prior	prior	ADJ
fumecheng-13732	119	7	knowledge	knowledge	NOUN
fumecheng-13732	119	8	,	,	PUNCT
fumecheng-13732	119	9	a	a	DET
fumecheng-13732	119	10	trial	trial	NOUN
fumecheng-13732	119	11	functional	functional	NOUN
fumecheng-13732	119	12	is	be	AUX
fumecheng-13732	119	13	selected	select	VERB
fumecheng-13732	119	14	that	that	PRON
fumecheng-13732	119	15	contains	contain	VERB
fumecheng-13732	119	16	some	some	DET
fumecheng-13732	119	17	unknown	unknown	ADJ
fumecheng-13732	119	18	parameters	parameter	NOUN
fumecheng-13732	119	19	.	.	PUNCT
fumecheng-13732	120	1	subsequently	subsequently	ADV
fumecheng-13732	120	2	,	,	PUNCT
fumecheng-13732	120	3	the	the	DET
fumecheng-13732	120	4	variational	variational	ADJ
fumecheng-13732	120	5	problem	problem	NOUN
fumecheng-13732	120	6	is	be	AUX
fumecheng-13732	120	7	formulated	formulate	VERB
fumecheng-13732	120	8	by	by	ADP
fumecheng-13732	120	9	applying	apply	VERB
fumecheng-13732	120	10	specific	specific	ADJ
fumecheng-13732	120	11	constraints	constraint	NOUN
fumecheng-13732	120	12	and	and	CCONJ
fumecheng-13732	120	13	principles	principle	NOUN
fumecheng-13732	120	14	.	.	PUNCT
fumecheng-13732	121	1	the	the	DET
fumecheng-13732	121	2	fundamental	fundamental	ADJ
fumecheng-13732	121	3	concept	concept	NOUN
fumecheng-13732	121	4	is	be	AUX
fumecheng-13732	121	5	to	to	PART
fumecheng-13732	121	6	partially	partially	ADV
fumecheng-13732	121	7	invert	invert	VERB
fumecheng-13732	121	8	the	the	DET
fumecheng-13732	121	9	problem	problem	NOUN
fumecheng-13732	121	10	by	by	ADP
fumecheng-13732	121	11	selecting	select	VERB
fumecheng-13732	121	12	a	a	DET
fumecheng-13732	121	13	trial	trial	NOUN
fumecheng-13732	121	14	functional	functional	NOUN
fumecheng-13732	121	15	that	that	PRON
fumecheng-13732	121	16	satisfies	satisfy	VERB
fumecheng-13732	121	17	some	some	PRON
fumecheng-13732	121	18	of	of	ADP
fumecheng-13732	121	19	the	the	DET
fumecheng-13732	121	20	essential	essential	ADJ
fumecheng-13732	121	21	properties	property	NOUN
fumecheng-13732	121	22	of	of	ADP
fumecheng-13732	121	23	the	the	DET
fumecheng-13732	121	24	solution	solution	NOUN
fumecheng-13732	121	25	.	.	PUNCT
fumecheng-13732	122	1	subsequently	subsequently	ADV
fumecheng-13732	122	2	,	,	PUNCT
fumecheng-13732	122	3	the	the	DET
fumecheng-13732	122	4	functional	functional	ADJ
fumecheng-13732	122	5	is	be	AUX
fumecheng-13732	122	6	varied	varied	ADJ
fumecheng-13732	122	7	with	with	ADP
fumecheng-13732	122	8	respect	respect	NOUN
fumecheng-13732	122	9	to	to	ADP
fumecheng-13732	122	10	the	the	DET
fumecheng-13732	122	11	unknown	unknown	ADJ
fumecheng-13732	122	12	parameters	parameter	NOUN
fumecheng-13732	122	13	,	,	PUNCT
fumecheng-13732	122	14	thereby	thereby	ADV
fumecheng-13732	122	15	obtaining	obtain	VERB
fumecheng-13732	122	16	the	the	DET
fumecheng-13732	122	17	euler	euler	ADJ
fumecheng-13732	122	18	-	-	PUNCT
fumecheng-13732	122	19	lagrange	lagrange	NOUN
fumecheng-13732	122	20	equations	equation	NOUN
fumecheng-13732	122	21	.	.	PUNCT
fumecheng-13732	123	1	the	the	DET
fumecheng-13732	123	2	semi	semi	ADJ
fumecheng-13732	123	3	-	-	ADJ
fumecheng-13732	123	4	inverse	inverse	ADJ
fumecheng-13732	123	5	method	method	NOUN
fumecheng-13732	123	6	is	be	AUX
fumecheng-13732	123	7	advantageous	advantageous	ADJ
fumecheng-13732	123	8	in	in	SCONJ
fumecheng-13732	123	9	that	that	SCONJ
fumecheng-13732	123	10	it	it	PRON
fumecheng-13732	123	11	reduces	reduce	VERB
fumecheng-13732	123	12	the	the	DET
fumecheng-13732	123	13	complexity	complexity	NOUN
fumecheng-13732	123	14	of	of	ADP
fumecheng-13732	123	15	the	the	DET
fumecheng-13732	123	16	problem	problem	NOUN
fumecheng-13732	123	17	by	by	ADP
fumecheng-13732	123	18	narrowing	narrow	VERB
fumecheng-13732	123	19	down	down	ADP
fumecheng-13732	123	20	the	the	DET
fumecheng-13732	123	21	search	search	NOUN
fumecheng-13732	123	22	space	space	NOUN
fumecheng-13732	123	23	.	.	PUNCT
fumecheng-13732	124	1	it	it	PRON
fumecheng-13732	124	2	offers	offer	VERB
fumecheng-13732	124	3	a	a	DET
fumecheng-13732	124	4	methodology	methodology	NOUN
fumecheng-13732	124	5	for	for	ADP
fumecheng-13732	124	6	the	the	DET
fumecheng-13732	124	7	acquisition	acquisition	NOUN
fumecheng-13732	124	8	of	of	ADP
fumecheng-13732	124	9	approximate	approximate	ADJ
fumecheng-13732	124	10	solutions	solution	NOUN
fumecheng-13732	124	11	when	when	SCONJ
fumecheng-13732	124	12	the	the	DET
fumecheng-13732	124	13	identification	identification	NOUN
fumecheng-13732	124	14	of	of	ADP
fumecheng-13732	124	15	exact	exact	ADJ
fumecheng-13732	124	16	solutions	solution	NOUN
fumecheng-13732	124	17	is	be	AUX
fumecheng-13732	124	18	challenging	challenge	VERB
fumecheng-13732	124	19	.	.	PUNCT
fumecheng-13732	125	1	moreover	moreover	ADV
fumecheng-13732	125	2	,	,	PUNCT
fumecheng-13732	125	3	it	it	PRON
fumecheng-13732	125	4	is	be	AUX
fumecheng-13732	125	5	capable	capable	ADJ
fumecheng-13732	125	6	of	of	ADP
fumecheng-13732	125	7	handling	handle	VERB
fumecheng-13732	125	8	nonlinear	nonlinear	ADJ
fumecheng-13732	125	9	problems	problem	NOUN
fumecheng-13732	125	10	and	and	CCONJ
fumecheng-13732	125	11	can	can	AUX
fumecheng-13732	125	12	be	be	AUX
fumecheng-13732	125	13	extended	extend	VERB
fumecheng-13732	125	14	to	to	ADP
fumecheng-13732	125	15	multidimensional	multidimensional	ADJ
fumecheng-13732	125	16	and	and	CCONJ
fumecheng-13732	125	17	time	time	NOUN
fumecheng-13732	125	18	-	-	PUNCT
fumecheng-13732	125	19	dependent	dependent	ADJ
fumecheng-13732	125	20	systems	system	NOUN
fumecheng-13732	125	21	.	.	PUNCT
fumecheng-13732	126	1	654	654	NUM
fumecheng-13732	126	2	j.h	j.h	NOUN
fumecheng-13732	126	3	.	.	PUNCT
fumecheng-13732	127	1	he	he	PRON
fumecheng-13732	127	2	,	,	PUNCT
fumecheng-13732	127	3	j.	j.	PROPN
fumecheng-13732	127	4	ma	ma	PROPN
fumecheng-13732	127	5	,	,	PUNCT
fumecheng-13732	127	6	a.a	a.a	PROPN
fumecheng-13732	127	7	.	.	PROPN
fumecheng-13732	127	8	alsolam	alsolam	PROPN
fumecheng-13732	127	9	,	,	PUNCT
fumecheng-13732	127	10	c.h	c.h	PROPN
fumecheng-13732	127	11	.	.	PUNCT
fumecheng-13732	128	1	he	he	PRON
fumecheng-13732	128	2	in	in	ADP
fumecheng-13732	128	3	accordance	accordance	NOUN
fumecheng-13732	128	4	with	with	ADP
fumecheng-13732	128	5	the	the	DET
fumecheng-13732	128	6	semi	semi	ADJ
fumecheng-13732	128	7	-	-	ADJ
fumecheng-13732	128	8	inverse	inverse	ADJ
fumecheng-13732	128	9	method	method	NOUN
fumecheng-13732	128	10	,	,	PUNCT
fumecheng-13732	128	11	the	the	DET
fumecheng-13732	128	12	following	follow	VERB
fumecheng-13732	128	13	assumption	assumption	NOUN
fumecheng-13732	128	14	is	be	AUX
fumecheng-13732	128	15	made	make	VERB
fumecheng-13732	128	16	:	:	PUNCT
fumecheng-13732	128	17	2	2	NUM
fumecheng-13732	128	18	2	2	NUM
fumecheng-13732	128	19	2	2	NUM
fumecheng-13732	128	20	31	31	NUM
fumecheng-13732	128	21	1	1	NUM
fumecheng-13732	128	22	1	1	NUM
fumecheng-13732	128	23	1	1	NUM
fumecheng-13732	128	24	(	(	PUNCT
fumecheng-13732	128	25	,	,	PUNCT
fumecheng-13732	128	26	)	)	PUNCT
fumecheng-13732	128	27	2	2	NUM
fumecheng-13732	128	28	2	2	NUM
fumecheng-13732	128	29	4	4	NUM
fumecheng-13732	128	30	3	3	NUM
fumecheng-13732	128	31	j	j	PROPN
fumecheng-13732	128	32	w	w	PROPN
fumecheng-13732	128	33	k	k	PROPN
fumecheng-13732	128	34	w	w	PROPN
fumecheng-13732	128	35	w	w	PROPN
fumecheng-13732	128	36	w	w	PROPN
fumecheng-13732	128	37	w	w	PROPN
fumecheng-13732	128	38	w	w	PROPN
fumecheng-13732	128	39	mw	mw	PROPN
fumecheng-13732	128	40	f	f	NOUN
fumecheng-13732	128	41	dt	dt	NOUN
fumecheng-13732	128	42			ADP
fumecheng-13732	129	1			PROPN
fumecheng-13732	129	2			ADV
fumecheng-13732	129	3	=	=	PROPN
fumecheng-13732	129	4	−	−	PROPN
fumecheng-13732	130	1	+	+	CCONJ
fumecheng-13732	131	1	+	+	PUNCT
fumecheng-13732	132	1	+	+	PUNCT
fumecheng-13732	132	2	+	+	ADJ
fumecheng-13732	132	3			NUM
fumecheng-13732	132	4			NOUN
fumecheng-13732	133	1			PROPN
fumecheng-13732	133	2			PROPN
fumecheng-13732	133	3			PUNCT
fumecheng-13732	133	4	(	(	PUNCT
fumecheng-13732	133	5	14	14	NUM
fumecheng-13732	133	6	)	)	PUNCT
fumecheng-13732	133	7	where	where	SCONJ
fumecheng-13732	133	8	f	f	PROPN
fumecheng-13732	133	9	is	be	AUX
fumecheng-13732	133	10	unknown	unknown	ADJ
fumecheng-13732	133	11	yet	yet	ADV
fumecheng-13732	133	12	.	.	PUNCT
fumecheng-13732	134	1	equation	equation	NOUN
fumecheng-13732	134	2	(	(	PUNCT
fumecheng-13732	134	3	14	14	NUM
fumecheng-13732	134	4	)	)	PUNCT
fumecheng-13732	134	5	represents	represent	VERB
fumecheng-13732	134	6	a	a	DET
fumecheng-13732	134	7	trial	trial	NOUN
fumecheng-13732	134	8	variational	variational	ADJ
fumecheng-13732	134	9	principle	principle	NOUN
fumecheng-13732	134	10	in	in	ADP
fumecheng-13732	134	11	our	our	PRON
fumecheng-13732	134	12	study	study	NOUN
fumecheng-13732	134	13	.	.	PUNCT
fumecheng-13732	135	1	in	in	ADP
fumecheng-13732	135	2	this	this	DET
fumecheng-13732	135	3	context	context	NOUN
fumecheng-13732	135	4	,	,	PUNCT
fumecheng-13732	135	5	the	the	DET
fumecheng-13732	135	6	independent	independent	ADJ
fumecheng-13732	135	7	variables	variable	NOUN
fumecheng-13732	135	8	play	play	VERB
fumecheng-13732	135	9	a	a	DET
fumecheng-13732	135	10	crucial	crucial	ADJ
fumecheng-13732	135	11	role	role	NOUN
fumecheng-13732	135	12	in	in	ADP
fumecheng-13732	135	13	defining	define	VERB
fumecheng-13732	135	14	the	the	DET
fumecheng-13732	135	15	problem	problem	NOUN
fumecheng-13732	135	16	.	.	PUNCT
fumecheng-13732	136	1	the	the	DET
fumecheng-13732	136	2	kinetic	kinetic	ADJ
fumecheng-13732	136	3	energy	energy	NOUN
fumecheng-13732	136	4	(	(	PUNCT
fumecheng-13732	136	5	k	k	NOUN
fumecheng-13732	136	6	)	)	PUNCT
fumecheng-13732	136	7	is	be	AUX
fumecheng-13732	136	8	considered	consider	VERB
fumecheng-13732	136	9	an	an	DET
fumecheng-13732	136	10	independent	independent	ADJ
fumecheng-13732	136	11	variable	variable	NOUN
fumecheng-13732	136	12	as	as	SCONJ
fumecheng-13732	136	13	it	it	PRON
fumecheng-13732	136	14	reflects	reflect	VERB
fumecheng-13732	136	15	the	the	DET
fumecheng-13732	136	16	main	main	ADJ
fumecheng-13732	136	17	dynamical	dynamical	ADJ
fumecheng-13732	136	18	property	property	NOUN
fumecheng-13732	136	19	of	of	ADP
fumecheng-13732	136	20	the	the	DET
fumecheng-13732	136	21	mems	mem	NOUN
fumecheng-13732	136	22	oscillator	oscillator	NOUN
fumecheng-13732	136	23	.	.	PUNCT
fumecheng-13732	137	1	when	when	SCONJ
fumecheng-13732	137	2	k	k	PROPN
fumecheng-13732	137	3	=	=	SYM
fumecheng-13732	137	4	0	0	PROPN
fumecheng-13732	137	5	,	,	PUNCT
fumecheng-13732	137	6	the	the	DET
fumecheng-13732	137	7	pull	pull	NOUN
fumecheng-13732	137	8	-	-	PUNCT
fumecheng-13732	137	9	in	in	ADP
fumecheng-13732	137	10	motion	motion	NOUN
fumecheng-13732	137	11	occurs	occur	VERB
fumecheng-13732	137	12	.	.	PUNCT
fumecheng-13732	138	1	additionally	additionally	ADV
fumecheng-13732	138	2	,	,	PUNCT
fumecheng-13732	138	3	the	the	DET
fumecheng-13732	138	4	displacement	displacement	NOUN
fumecheng-13732	138	5	(	(	PUNCT
fumecheng-13732	138	6	w	w	NOUN
fumecheng-13732	138	7	)	)	PUNCT
fumecheng-13732	138	8	is	be	AUX
fumecheng-13732	138	9	another	another	DET
fumecheng-13732	138	10	independent	independent	ADJ
fumecheng-13732	138	11	variable	variable	NOUN
fumecheng-13732	138	12	.	.	PUNCT
fumecheng-13732	139	1	when	when	SCONJ
fumecheng-13732	139	2	w=1	w=1	PROPN
fumecheng-13732	139	3	,	,	PUNCT
fumecheng-13732	139	4	the	the	DET
fumecheng-13732	139	5	pull	pull	NOUN
fumecheng-13732	139	6	-	-	PUNCT
fumecheng-13732	139	7	in	in	ADP
fumecheng-13732	139	8	instability	instability	NOUN
fumecheng-13732	139	9	occurs	occur	VERB
fumecheng-13732	139	10	.	.	PUNCT
fumecheng-13732	140	1	thus	thus	ADV
fumecheng-13732	140	2	,	,	PUNCT
fumecheng-13732	140	3	k	k	PROPN
fumecheng-13732	140	4	and	and	CCONJ
fumecheng-13732	140	5	w	w	PROPN
fumecheng-13732	140	6	are	be	AUX
fumecheng-13732	140	7	the	the	DET
fumecheng-13732	140	8	main	main	ADJ
fumecheng-13732	140	9	parameters	parameter	NOUN
fumecheng-13732	140	10	for	for	ADP
fumecheng-13732	140	11	studying	study	VERB
fumecheng-13732	140	12	the	the	DET
fumecheng-13732	140	13	pull	pull	VERB
fumecheng-13732	140	14	-	-	PUNCT
fumecheng-13732	140	15	in	in	ADP
fumecheng-13732	140	16	property	property	NOUN
fumecheng-13732	140	17	.	.	PUNCT
fumecheng-13732	141	1	the	the	DET
fumecheng-13732	141	2	variational	variational	ADJ
fumecheng-13732	141	3	principle	principle	NOUN
fumecheng-13732	141	4	allows	allow	VERB
fumecheng-13732	141	5	us	we	PRON
fumecheng-13732	141	6	to	to	PART
fumecheng-13732	141	7	understand	understand	VERB
fumecheng-13732	141	8	the	the	DET
fumecheng-13732	141	9	significance	significance	NOUN
fumecheng-13732	141	10	of	of	ADP
fumecheng-13732	141	11	these	these	DET
fumecheng-13732	141	12	variables	variable	NOUN
fumecheng-13732	141	13	and	and	CCONJ
fumecheng-13732	141	14	how	how	SCONJ
fumecheng-13732	141	15	they	they	PRON
fumecheng-13732	141	16	interact	interact	VERB
fumecheng-13732	141	17	.	.	PUNCT
fumecheng-13732	142	1	a	a	DET
fumecheng-13732	142	2	comprehensive	comprehensive	ADJ
fumecheng-13732	142	3	understanding	understanding	NOUN
fumecheng-13732	142	4	of	of	ADP
fumecheng-13732	142	5	these	these	DET
fumecheng-13732	142	6	independent	independent	ADJ
fumecheng-13732	142	7	variables	variable	NOUN
fumecheng-13732	142	8	is	be	AUX
fumecheng-13732	142	9	essential	essential	ADJ
fumecheng-13732	142	10	for	for	ADP
fumecheng-13732	142	11	a	a	DET
fumecheng-13732	142	12	detailed	detailed	ADJ
fumecheng-13732	142	13	analysis	analysis	NOUN
fumecheng-13732	142	14	of	of	ADP
fumecheng-13732	142	15	the	the	DET
fumecheng-13732	142	16	variational	variational	ADJ
fumecheng-13732	142	17	principle	principle	NOUN
fumecheng-13732	142	18	and	and	CCONJ
fumecheng-13732	142	19	its	its	PRON
fumecheng-13732	142	20	applications	application	NOUN
fumecheng-13732	142	21	in	in	ADP
fumecheng-13732	142	22	our	our	PRON
fumecheng-13732	142	23	study	study	NOUN
fumecheng-13732	142	24	.	.	PUNCT
fumecheng-13732	143	1	the	the	DET
fumecheng-13732	143	2	euler	euler	NOUN
fumecheng-13732	143	3	-	-	PUNCT
fumecheng-13732	143	4	lagrange	lagrange	NOUN
fumecheng-13732	143	5	equation	equation	NOUN
fumecheng-13732	143	6	with	with	ADP
fumecheng-13732	143	7	respect	respect	NOUN
fumecheng-13732	143	8	to	to	ADP
fumecheng-13732	143	9	w	w	NOUN
fumecheng-13732	143	10	is	be	AUX
fumecheng-13732	143	11	:	:	PUNCT
fumecheng-13732	143	12	2	2	NUM
fumecheng-13732	143	13	21	21	NUM
fumecheng-13732	143	14	1	1	NUM
fumecheng-13732	143	15	(	(	PUNCT
fumecheng-13732	143	16	)	)	PUNCT
fumecheng-13732	143	17	0	0	NUM
fumecheng-13732	143	18	2	2	NUM
fumecheng-13732	143	19	4	4	NUM
fumecheng-13732	143	20	f	f	NOUN
fumecheng-13732	143	21	w	w	PROPN
fumecheng-13732	143	22	w	w	PROPN
fumecheng-13732	143	23	w	w	PROPN
fumecheng-13732	143	24	w	w	PROPN
fumecheng-13732	143	25	w	w	PROPN
fumecheng-13732	143	26	w	w	PROPN
fumecheng-13732	143	27	m	m	PROPN
fumecheng-13732	143	28	w	w	ADP
fumecheng-13732	143	29			NUM
fumecheng-13732	143	30			NUM
fumecheng-13732	143	31			PROPN
fumecheng-13732	143	32			PROPN
fumecheng-13732	143	33	−	−	NOUN
fumecheng-13732	143	34	−	−	PROPN
fumecheng-13732	144	1	+	+	CCONJ
fumecheng-13732	144	2	+	+	PUNCT
fumecheng-13732	145	1	+	+	PUNCT
fumecheng-13732	145	2	+	+	PUNCT
fumecheng-13732	145	3	+	+	CCONJ
fumecheng-13732	145	4	=	=	NOUN
fumecheng-13732	145	5	,	,	PUNCT
fumecheng-13732	145	6	(	(	PUNCT
fumecheng-13732	145	7	15	15	NUM
fumecheng-13732	145	8	)	)	PUNCT
fumecheng-13732	145	9	or	or	CCONJ
fumecheng-13732	145	10	2	2	NUM
fumecheng-13732	145	11	21	21	NUM
fumecheng-13732	145	12	0	0	NUM
fumecheng-13732	145	13	2	2	NUM
fumecheng-13732	145	14	f	f	NOUN
fumecheng-13732	145	15	w	w	PROPN
fumecheng-13732	145	16	w	w	PROPN
fumecheng-13732	145	17	w	w	PROPN
fumecheng-13732	145	18	w	w	PROPN
fumecheng-13732	145	19	w	w	PROPN
fumecheng-13732	145	20	w	w	PROPN
fumecheng-13732	145	21	m	m	PROPN
fumecheng-13732	145	22	w	w	ADP
fumecheng-13732	145	23			NUM
fumecheng-13732	145	24			NUM
fumecheng-13732	145	25			SYM
fumecheng-13732	145	26			PROPN
fumecheng-13732	145	27	−	−	PUNCT
fumecheng-13732	145	28	−	−	PROPN
fumecheng-13732	145	29	+	+	SYM
fumecheng-13732	145	30	+	+	PUNCT
fumecheng-13732	145	31	+	+	PUNCT
fumecheng-13732	145	32	+	+	PUNCT
fumecheng-13732	145	33	+	+	CCONJ
fumecheng-13732	145	34	=	=	NOUN
fumecheng-13732	145	35	,	,	PUNCT
fumecheng-13732	145	36	(	(	PUNCT
fumecheng-13732	145	37	16	16	NUM
fumecheng-13732	145	38	)	)	PUNCT
fumecheng-13732	145	39	where	where	SCONJ
fumecheng-13732	145	40	δf	δf	NOUN
fumecheng-13732	145	41	/	/	SYM
fumecheng-13732	145	42	δw	δw	NOUN
fumecheng-13732	145	43	is	be	AUX
fumecheng-13732	145	44	the	the	DET
fumecheng-13732	145	45	fractional	fractional	ADJ
fumecheng-13732	145	46	derivative	derivative	NOUN
fumecheng-13732	145	47	[	[	X
fumecheng-13732	145	48	30	30	NUM
fumecheng-13732	145	49	]	]	PUNCT
fumecheng-13732	145	50	,	,	PUNCT
fumecheng-13732	145	51	defined	define	VERB
fumecheng-13732	145	52	as	as	ADP
fumecheng-13732	145	53	:	:	SYM
fumecheng-13732	145	54	2	2	NUM
fumecheng-13732	145	55	2	2	NUM
fumecheng-13732	145	56	(	(	PUNCT
fumecheng-13732	145	57	)	)	PUNCT
fumecheng-13732	145	58	(	(	PUNCT
fumecheng-13732	145	59	)	)	PUNCT
fumecheng-13732	146	1	f	f	PROPN
fumecheng-13732	147	1	f	f	PROPN
fumecheng-13732	148	1	d	d	X
fumecheng-13732	148	2	f	f	PROPN
fumecheng-13732	148	3	d	d	X
fumecheng-13732	148	4	f	f	PROPN
fumecheng-13732	148	5	w	w	PROPN
fumecheng-13732	148	6	w	w	PROPN
fumecheng-13732	148	7	dt	dt	PROPN
fumecheng-13732	148	8	w	w	PROPN
fumecheng-13732	148	9	wdt	wdt	PROPN
fumecheng-13732	148	10			NUM
fumecheng-13732	148	11			NUM
fumecheng-13732	148	12			ADJ
fumecheng-13732	148	13			ADJ
fumecheng-13732	148	14			NOUN
fumecheng-13732	148	15	=	=	SYM
fumecheng-13732	149	1	−	−	PROPN
fumecheng-13732	149	2	+	+	CCONJ
fumecheng-13732	149	3			ADJ
fumecheng-13732	149	4			ADJ
fumecheng-13732	149	5			ADJ
fumecheng-13732	149	6			NOUN
fumecheng-13732	149	7	.	.	PUNCT
fumecheng-13732	150	1	(	(	PUNCT
fumecheng-13732	150	2	17	17	NUM
fumecheng-13732	150	3	)	)	PUNCT
fumecheng-13732	150	4	in	in	ADP
fumecheng-13732	150	5	view	view	NOUN
fumecheng-13732	150	6	of	of	ADP
fumecheng-13732	150	7	eqs	eqs	PROPN
fumecheng-13732	150	8	.	.	PUNCT
fumecheng-13732	151	1	(	(	PUNCT
fumecheng-13732	151	2	13	13	NUM
fumecheng-13732	151	3	)	)	PUNCT
fumecheng-13732	151	4	and	and	CCONJ
fumecheng-13732	151	5	(	(	PUNCT
fumecheng-13732	151	6	6	6	NUM
fumecheng-13732	151	7	)	)	PUNCT
fumecheng-13732	151	8	,	,	PUNCT
fumecheng-13732	151	9	we	we	PRON
fumecheng-13732	151	10	have	have	VERB
fumecheng-13732	151	11	:	:	PUNCT
fumecheng-13732	151	12	2	2	NUM
fumecheng-13732	151	13	2	2	NUM
fumecheng-13732	151	14	21	21	NUM
fumecheng-13732	151	15	1	1	NUM
fumecheng-13732	151	16	2	2	NUM
fumecheng-13732	151	17	2	2	NUM
fumecheng-13732	151	18	f	f	NOUN
fumecheng-13732	151	19	w	w	PROPN
fumecheng-13732	151	20	w	w	PROPN
fumecheng-13732	151	21	w	w	PROPN
fumecheng-13732	151	22	w	w	PROPN
fumecheng-13732	151	23	w	w	PROPN
fumecheng-13732	151	24	w	w	PROPN
fumecheng-13732	151	25	m	m	PROPN
fumecheng-13732	151	26	w	w	PROPN
fumecheng-13732	151	27	k	k	PROPN
fumecheng-13732	151	28	w	w	PROPN
fumecheng-13732	151	29			PROPN
fumecheng-13732	151	30			NUM
fumecheng-13732	151	31			SYM
fumecheng-13732	151	32			PROPN
fumecheng-13732	151	33			ADV
fumecheng-13732	151	34	=	=	PROPN
fumecheng-13732	152	1	+	+	CCONJ
fumecheng-13732	152	2	−	−	PROPN
fumecheng-13732	152	3	−	−	NOUN
fumecheng-13732	153	1	−	−	NOUN
fumecheng-13732	153	2	−	−	PROPN
fumecheng-13732	153	3	=	=	SYM
fumecheng-13732	154	1	−	−	PROPN
fumecheng-13732	154	2	=	=	SYM
fumecheng-13732	154	3	−	−	PROPN
fumecheng-13732	154	4	.	.	PUNCT
fumecheng-13732	155	1	(	(	PUNCT
fumecheng-13732	155	2	18	18	NUM
fumecheng-13732	155	3	)	)	PUNCT
fumecheng-13732	155	4	from	from	ADP
fumecheng-13732	155	5	eq	eq	ADP
fumecheng-13732	155	6	.	.	PUNCT
fumecheng-13732	156	1	(	(	PUNCT
fumecheng-13732	156	2	18	18	NUM
fumecheng-13732	156	3	)	)	PUNCT
fumecheng-13732	156	4	,	,	PUNCT
fumecheng-13732	156	5	f	f	PROPN
fumecheng-13732	156	6	can	can	AUX
fumecheng-13732	156	7	be	be	AUX
fumecheng-13732	156	8	identified	identify	VERB
fumecheng-13732	156	9	as	as	ADP
fumecheng-13732	156	10	:	:	PUNCT
fumecheng-13732	156	11	1f	1f	NUM
fumecheng-13732	156	12	kw	kw	INTJ
fumecheng-13732	156	13	f=	f=	PROPN
fumecheng-13732	156	14	−	−	PROPN
fumecheng-13732	157	1	+	+	CCONJ
fumecheng-13732	157	2	,	,	PUNCT
fumecheng-13732	157	3	(	(	PUNCT
fumecheng-13732	157	4	19	19	NUM
fumecheng-13732	157	5	)	)	PUNCT
fumecheng-13732	157	6	where	where	SCONJ
fumecheng-13732	157	7	f1	f1	NOUN
fumecheng-13732	157	8	is	be	AUX
fumecheng-13732	157	9	an	an	DET
fumecheng-13732	157	10	unknown	unknown	ADJ
fumecheng-13732	157	11	function	function	NOUN
fumecheng-13732	157	12	of	of	ADP
fumecheng-13732	157	13	k.	k.	PROPN
fumecheng-13732	158	1	so	so	ADV
fumecheng-13732	158	2	the	the	DET
fumecheng-13732	158	3	trial	trial	NOUN
fumecheng-13732	158	4	-	-	PUNCT
fumecheng-13732	158	5	functional	functional	ADJ
fumecheng-13732	158	6	can	can	AUX
fumecheng-13732	158	7	be	be	AUX
fumecheng-13732	158	8	updated	update	VERB
fumecheng-13732	158	9	as	as	ADP
fumecheng-13732	158	10	:	:	PUNCT
fumecheng-13732	158	11	2	2	NUM
fumecheng-13732	158	12	2	2	NUM
fumecheng-13732	158	13	2	2	NUM
fumecheng-13732	158	14	3	3	NUM
fumecheng-13732	158	15	1	1	NUM
fumecheng-13732	158	16	1	1	NUM
fumecheng-13732	158	17	1	1	NUM
fumecheng-13732	158	18	1	1	NUM
fumecheng-13732	158	19	1	1	NUM
fumecheng-13732	158	20	(	(	PUNCT
fumecheng-13732	158	21	,	,	PUNCT
fumecheng-13732	158	22	)	)	PUNCT
fumecheng-13732	158	23	2	2	NUM
fumecheng-13732	158	24	2	2	NUM
fumecheng-13732	158	25	4	4	NUM
fumecheng-13732	158	26	3	3	NUM
fumecheng-13732	158	27	j	j	PROPN
fumecheng-13732	158	28	w	w	PROPN
fumecheng-13732	158	29	k	k	PROPN
fumecheng-13732	158	30	w	w	PROPN
fumecheng-13732	158	31	w	w	PROPN
fumecheng-13732	158	32	w	w	PROPN
fumecheng-13732	158	33	w	w	PROPN
fumecheng-13732	158	34	w	w	PROPN
fumecheng-13732	158	35	mw	mw	NOUN
fumecheng-13732	159	1	kw	kw	INTJ
fumecheng-13732	159	2	f	f	NOUN
fumecheng-13732	159	3	dt	dt	NOUN
fumecheng-13732	159	4			NOUN
fumecheng-13732	160	1			PROPN
fumecheng-13732	160	2			ADV
fumecheng-13732	160	3	=	=	PROPN
fumecheng-13732	160	4	−	−	PROPN
fumecheng-13732	161	1	+	+	CCONJ
fumecheng-13732	161	2	+	+	PUNCT
fumecheng-13732	162	1	+	+	CCONJ
fumecheng-13732	162	2	−	−	X
fumecheng-13732	163	1	+	+	NOUN
fumecheng-13732	163	2			NOUN
fumecheng-13732	163	3			NOUN
fumecheng-13732	164	1			PROPN
fumecheng-13732	164	2			PROPN
fumecheng-13732	164	3			PUNCT
fumecheng-13732	164	4	(	(	PUNCT
fumecheng-13732	164	5	20	20	NUM
fumecheng-13732	164	6	)	)	PUNCT
fumecheng-13732	164	7	the	the	DET
fumecheng-13732	164	8	euler	euler	NOUN
fumecheng-13732	164	9	-	-	PUNCT
fumecheng-13732	164	10	lagrange	lagrange	NOUN
fumecheng-13732	164	11	equation	equation	NOUN
fumecheng-13732	164	12	with	with	ADP
fumecheng-13732	164	13	respect	respect	NOUN
fumecheng-13732	164	14	to	to	ADP
fumecheng-13732	164	15	k	k	PROPN
fumecheng-13732	164	16	is	be	AUX
fumecheng-13732	164	17	:	:	PUNCT
fumecheng-13732	164	18	1	1	NUM
fumecheng-13732	164	19	0	0	NUM
fumecheng-13732	165	1	f	f	NOUN
fumecheng-13732	165	2	w	w	PROPN
fumecheng-13732	165	3	k	k	PROPN
fumecheng-13732	166	1			NUM
fumecheng-13732	166	2			NUM
fumecheng-13732	166	3	−	−	NOUN
fumecheng-13732	166	4	+	+	CCONJ
fumecheng-13732	166	5	=	=	NOUN
fumecheng-13732	166	6	.	.	PUNCT
fumecheng-13732	167	1	(	(	PUNCT
fumecheng-13732	167	2	21	21	NUM
fumecheng-13732	167	3	)	)	PUNCT
fumecheng-13732	167	4	that	that	PRON
fumecheng-13732	167	5	is	be	AUX
fumecheng-13732	167	6	:	:	PUNCT
fumecheng-13732	167	7	variational	variational	ADJ
fumecheng-13732	167	8	approach	approach	NOUN
fumecheng-13732	167	9	to	to	ADP
fumecheng-13732	167	10	micro	micro	ADJ
fumecheng-13732	167	11	-	-	ADJ
fumecheng-13732	167	12	electro	electro	ADJ
fumecheng-13732	167	13	-	-	PUNCT
fumecheng-13732	167	14	mechanical	mechanical	ADJ
fumecheng-13732	167	15	systems	system	NOUN
fumecheng-13732	167	16	655	655	NUM
fumecheng-13732	167	17	2	2	NUM
fumecheng-13732	167	18	1	1	NUM
fumecheng-13732	167	19	2	2	NUM
fumecheng-13732	167	20	4	4	NUM
fumecheng-13732	167	21	8	8	NUM
fumecheng-13732	167	22	(	(	PUNCT
fumecheng-13732	167	23	1	1	NUM
fumecheng-13732	167	24	)	)	PUNCT
fumecheng-13732	167	25	2(1	2(1	NUM
fumecheng-13732	167	26	)	)	PUNCT
fumecheng-13732	168	1	m	m	VERB
fumecheng-13732	168	2	m	m	VERB
fumecheng-13732	168	3	k	k	NOUN
fumecheng-13732	168	4	mf	mf	PROPN
fumecheng-13732	168	5	w	w	PROPN
fumecheng-13732	168	6	k	k	PROPN
fumecheng-13732	168	7	m	m	PROPN
fumecheng-13732	168	8			NUM
fumecheng-13732	168	9			NUM
fumecheng-13732	168	10	+	+	NUM
fumecheng-13732	168	11	−	−	NOUN
fumecheng-13732	168	12	−	−	PROPN
fumecheng-13732	169	1	=	=	PUNCT
fumecheng-13732	170	1	=	=	NOUN
fumecheng-13732	171	1	−	−	PROPN
fumecheng-13732	171	2	.	.	PUNCT
fumecheng-13732	172	1	(	(	PUNCT
fumecheng-13732	172	2	22	22	NUM
fumecheng-13732	172	3	)	)	PUNCT
fumecheng-13732	172	4	now	now	ADV
fumecheng-13732	172	5	f1	f1	NOUN
fumecheng-13732	172	6	can	can	AUX
fumecheng-13732	172	7	be	be	AUX
fumecheng-13732	172	8	identified	identify	VERB
fumecheng-13732	172	9	as	as	ADP
fumecheng-13732	172	10	:	:	PUNCT
fumecheng-13732	172	11	3/2	3/2	NUM
fumecheng-13732	172	12	2	2	NUM
fumecheng-13732	172	13	1	1	NUM
fumecheng-13732	172	14	2	2	NUM
fumecheng-13732	172	15	2	2	NUM
fumecheng-13732	172	16	1	1	NUM
fumecheng-13732	172	17	4	4	NUM
fumecheng-13732	172	18	8	8	NUM
fumecheng-13732	172	19	(	(	PUNCT
fumecheng-13732	172	20	1	1	NUM
fumecheng-13732	172	21	)	)	PUNCT
fumecheng-13732	172	22	2(1	2(1	NUM
fumecheng-13732	172	23	)	)	PUNCT
fumecheng-13732	172	24	24(1	24(1	NUM
fumecheng-13732	172	25	)	)	PUNCT
fumecheng-13732	173	1	mk	mk	NOUN
fumecheng-13732	174	1	f	f	NOUN
fumecheng-13732	174	2	m	m	VERB
fumecheng-13732	174	3	k	k	VERB
fumecheng-13732	174	4	m	m	VERB
fumecheng-13732	174	5	m	m	VERB
fumecheng-13732	174	6	m	m	VERB
fumecheng-13732	174	7			PROPN
fumecheng-13732	174	8	=	=	NOUN
fumecheng-13732	175	1	−	−	PROPN
fumecheng-13732	175	2	−	−	PROPN
fumecheng-13732	175	3	−	−	PROPN
fumecheng-13732	175	4	−	−	PROPN
fumecheng-13732	175	5	−	−	PROPN
fumecheng-13732	175	6	.	.	PUNCT
fumecheng-13732	176	1	(	(	PUNCT
fumecheng-13732	176	2	23	23	NUM
fumecheng-13732	176	3	)	)	PUNCT
fumecheng-13732	176	4	finally	finally	ADV
fumecheng-13732	176	5	,	,	PUNCT
fumecheng-13732	176	6	the	the	DET
fumecheng-13732	176	7	following	follow	VERB
fumecheng-13732	176	8	variational	variational	ADJ
fumecheng-13732	176	9	formulation	formulation	NOUN
fumecheng-13732	176	10	is	be	AUX
fumecheng-13732	176	11	obtained	obtain	VERB
fumecheng-13732	176	12	:	:	PUNCT
fumecheng-13732	176	13	2	2	NUM
fumecheng-13732	176	14	2	2	NUM
fumecheng-13732	176	15	2	2	NUM
fumecheng-13732	176	16	3	3	NUM
fumecheng-13732	176	17	3/2	3/2	NUM
fumecheng-13732	176	18	2	2	NUM
fumecheng-13732	176	19	2	2	NUM
fumecheng-13732	176	20	1	1	NUM
fumecheng-13732	176	21	1	1	NUM
fumecheng-13732	176	22	1	1	NUM
fumecheng-13732	176	23	1	1	NUM
fumecheng-13732	176	24	(	(	PUNCT
fumecheng-13732	176	25	,	,	PUNCT
fumecheng-13732	176	26	)	)	PUNCT
fumecheng-13732	176	27	2	2	NUM
fumecheng-13732	176	28	2	2	NUM
fumecheng-13732	176	29	4	4	NUM
fumecheng-13732	176	30	3	3	NUM
fumecheng-13732	176	31	2	2	NUM
fumecheng-13732	176	32	1	1	NUM
fumecheng-13732	176	33	4	4	NUM
fumecheng-13732	176	34	8	8	NUM
fumecheng-13732	176	35	(	(	PUNCT
fumecheng-13732	176	36	1	1	NUM
fumecheng-13732	176	37	)	)	PUNCT
fumecheng-13732	176	38	2(1	2(1	NUM
fumecheng-13732	176	39	)	)	PUNCT
fumecheng-13732	176	40	24(1	24(1	NUM
fumecheng-13732	176	41	)	)	PUNCT
fumecheng-13732	177	1	j	j	PROPN
fumecheng-13732	177	2	w	w	PROPN
fumecheng-13732	177	3	k	k	PROPN
fumecheng-13732	177	4	w	w	PROPN
fumecheng-13732	177	5	w	w	PROPN
fumecheng-13732	177	6	w	w	PROPN
fumecheng-13732	177	7	w	w	PROPN
fumecheng-13732	177	8	w	w	PROPN
fumecheng-13732	177	9	mw	mw	X
fumecheng-13732	177	10	kw	kw	INTJ
fumecheng-13732	177	11	dt	dt	PROPN
fumecheng-13732	177	12	mk	mk	PROPN
fumecheng-13732	177	13	m	m	VERB
fumecheng-13732	177	14	k	k	NOUN
fumecheng-13732	177	15	m	m	VERB
fumecheng-13732	177	16	dt	dt	NOUN
fumecheng-13732	177	17	m	m	NOUN
fumecheng-13732	177	18	m	m	VERB
fumecheng-13732	177	19			ADV
fumecheng-13732	177	20			PROPN
fumecheng-13732	178	1			ADV
fumecheng-13732	178	2	=	=	PROPN
fumecheng-13732	178	3	−	−	PROPN
fumecheng-13732	179	1	+	+	CCONJ
fumecheng-13732	179	2	+	+	CCONJ
fumecheng-13732	179	3	+	+	CCONJ
fumecheng-13732	179	4	−	−	ADJ
fumecheng-13732	180	1			INTJ
fumecheng-13732	180	2			PROPN
fumecheng-13732	180	3			PROPN
fumecheng-13732	180	4			ADP
fumecheng-13732	180	5			PROPN
fumecheng-13732	180	6			PROPN
fumecheng-13732	180	7	+	+	NOUN
fumecheng-13732	180	8	−	−	PROPN
fumecheng-13732	180	9	−	−	PROPN
fumecheng-13732	180	10	−	−	NOUN
fumecheng-13732	180	11			PROPN
fumecheng-13732	180	12	−	−	PRON
fumecheng-13732	180	13	−	−	VERB
fumecheng-13732	180	14			PROPN
fumecheng-13732	180	15			X
fumecheng-13732	180	16			X
fumecheng-13732	180	17	(	(	PUNCT
fumecheng-13732	180	18	24	24	NUM
fumecheng-13732	180	19	)	)	PUNCT
fumecheng-13732	180	20	the	the	DET
fumecheng-13732	180	21	new	new	ADJ
fumecheng-13732	180	22	obtained	obtain	VERB
fumecheng-13732	180	23	variational	variational	ADJ
fumecheng-13732	180	24	formulation	formulation	NOUN
fumecheng-13732	180	25	given	give	VERB
fumecheng-13732	180	26	in	in	ADP
fumecheng-13732	180	27	eq	eq	ADP
fumecheng-13732	180	28	.	.	PUNCT
fumecheng-13732	181	1	(	(	PUNCT
fumecheng-13732	181	2	24	24	NUM
fumecheng-13732	181	3	)	)	PUNCT
fumecheng-13732	181	4	gives	give	VERB
fumecheng-13732	181	5	deeper	deep	ADJ
fumecheng-13732	181	6	insight	insight	NOUN
fumecheng-13732	181	7	into	into	ADP
fumecheng-13732	181	8	the	the	DET
fumecheng-13732	181	9	physical	physical	ADJ
fumecheng-13732	181	10	property	property	NOUN
fumecheng-13732	181	11	of	of	ADP
fumecheng-13732	181	12	the	the	DET
fumecheng-13732	181	13	mems	mem	NOUN
fumecheng-13732	181	14	oscillator	oscillator	NOUN
fumecheng-13732	181	15	in	in	ADP
fumecheng-13732	181	16	an	an	DET
fumecheng-13732	181	17	energy	energy	NOUN
fumecheng-13732	181	18	sense	sense	NOUN
fumecheng-13732	181	19	,	,	PUNCT
fumecheng-13732	181	20	but	but	CCONJ
fumecheng-13732	181	21	it	it	PRON
fumecheng-13732	181	22	is	be	AUX
fumecheng-13732	181	23	valid	valid	ADJ
fumecheng-13732	181	24	for	for	ADP
fumecheng-13732	181	25	the	the	DET
fumecheng-13732	181	26	small	small	ADJ
fumecheng-13732	181	27	displacement	displacement	NOUN
fumecheng-13732	181	28	.	.	PUNCT
fumecheng-13732	182	1	when	when	SCONJ
fumecheng-13732	182	2	w	w	NOUN
fumecheng-13732	182	3	is	be	AUX
fumecheng-13732	182	4	not	not	PART
fumecheng-13732	182	5	small	small	ADJ
fumecheng-13732	182	6	enough	enough	ADV
fumecheng-13732	182	7	,	,	PUNCT
fumecheng-13732	182	8	the	the	DET
fumecheng-13732	182	9	derivation	derivation	NOUN
fumecheng-13732	182	10	of	of	ADP
fumecheng-13732	182	11	the	the	DET
fumecheng-13732	182	12	variational	variational	ADJ
fumecheng-13732	182	13	principle	principle	NOUN
fumecheng-13732	182	14	is	be	AUX
fumecheng-13732	182	15	much	much	ADV
fumecheng-13732	182	16	more	more	ADV
fumecheng-13732	182	17	complex	complex	ADJ
fumecheng-13732	182	18	,	,	PUNCT
fumecheng-13732	182	19	and	and	CCONJ
fumecheng-13732	182	20	we	we	PRON
fumecheng-13732	182	21	obtain	obtain	VERB
fumecheng-13732	182	22	the	the	DET
fumecheng-13732	182	23	following	follow	VERB
fumecheng-13732	182	24	variational	variational	ADJ
fumecheng-13732	182	25	formulation	formulation	NOUN
fumecheng-13732	182	26	2	2	NUM
fumecheng-13732	182	27	2	2	NUM
fumecheng-13732	182	28	2	2	NUM
fumecheng-13732	182	29	3	3	NUM
fumecheng-13732	182	30	3	3	NUM
fumecheng-13732	182	31	3	3	NUM
fumecheng-13732	182	32	2	2	NUM
fumecheng-13732	182	33	2	2	NUM
fumecheng-13732	182	34	3	3	NUM
fumecheng-13732	182	35	1	1	NUM
fumecheng-13732	182	36	1	1	NUM
fumecheng-13732	182	37	1	1	NUM
fumecheng-13732	182	38	1	1	NUM
fumecheng-13732	182	39	(	(	PUNCT
fumecheng-13732	182	40	,	,	PUNCT
fumecheng-13732	182	41	)	)	PUNCT
fumecheng-13732	182	42	2	2	NUM
fumecheng-13732	182	43	2	2	NUM
fumecheng-13732	182	44	4	4	NUM
fumecheng-13732	182	45	3	3	NUM
fumecheng-13732	182	46	1	1	NUM
fumecheng-13732	182	47	ln(1	ln(1	NOUN
fumecheng-13732	182	48	)	)	PUNCT
fumecheng-13732	183	1	ln(1	ln(1	NOUN
fumecheng-13732	183	2	)	)	PUNCT
fumecheng-13732	183	3	6	6	NUM
fumecheng-13732	183	4	1	1	NUM
fumecheng-13732	183	5	1	1	NUM
fumecheng-13732	183	6	ln(1	ln(1	NOUN
fumecheng-13732	183	7	)	)	PUNCT
fumecheng-13732	183	8	(	(	PUNCT
fumecheng-13732	183	9	)	)	PUNCT
fumecheng-13732	183	10	2	2	NUM
fumecheng-13732	183	11	2	2	NUM
fumecheng-13732	184	1	j	j	PROPN
fumecheng-13732	184	2	w	w	PROPN
fumecheng-13732	184	3	k	k	PROPN
fumecheng-13732	184	4	w	w	PROPN
fumecheng-13732	184	5	w	w	PROPN
fumecheng-13732	184	6	w	w	PROPN
fumecheng-13732	184	7	w	w	PROPN
fumecheng-13732	184	8	w	w	PROPN
fumecheng-13732	184	9	mw	mw	PROPN
fumecheng-13732	184	10	dt	dt	PROPN
fumecheng-13732	184	11	w	w	PROPN
fumecheng-13732	184	12	mw	mw	PROPN
fumecheng-13732	184	13	w	w	PROPN
fumecheng-13732	184	14	mw	mw	PROPN
fumecheng-13732	184	15	m	m	PROPN
fumecheng-13732	184	16	w	w	PROPN
fumecheng-13732	184	17	dt	dt	PROPN
fumecheng-13732	184	18	a	a	PRON
fumecheng-13732	184	19	k	k	PROPN
fumecheng-13732	184	20	w	w	PROPN
fumecheng-13732	184	21	m	m	PROPN
fumecheng-13732	184	22	w	w	PROPN
fumecheng-13732	184	23	b	b	PROPN
fumecheng-13732	184	24	k	k	PROPN
fumecheng-13732	184	25	w	w	NOUN
fumecheng-13732	184	26	dt	dt	X
fumecheng-13732	184	27			NOUN
fumecheng-13732	185	1			PROPN
fumecheng-13732	185	2			ADV
fumecheng-13732	185	3	=	=	PROPN
fumecheng-13732	185	4	−	−	PROPN
fumecheng-13732	186	1	+	+	CCONJ
fumecheng-13732	187	1	+	+	PUNCT
fumecheng-13732	188	1	+	+	ADJ
fumecheng-13732	188	2			NUM
fumecheng-13732	188	3			NOUN
fumecheng-13732	189	1			PROPN
fumecheng-13732	189	2			PROPN
fumecheng-13732	190	1			PROPN
fumecheng-13732	190	2			NOUN
fumecheng-13732	191	1	−	−	PROPN
fumecheng-13732	192	1	+	+	CCONJ
fumecheng-13732	192	2	−	−	PROPN
fumecheng-13732	192	3	−	−	NOUN
fumecheng-13732	192	4	−	−	PROPN
fumecheng-13732	192	5	−	−	PUNCT
fumecheng-13732	192	6			PROPN
fumecheng-13732	192	7			VERB
fumecheng-13732	192	8			PROPN
fumecheng-13732	192	9			ADV
fumecheng-13732	192	10			ADJ
fumecheng-13732	192	11			ADJ
fumecheng-13732	192	12			NOUN
fumecheng-13732	192	13	+	+	NOUN
fumecheng-13732	192	14	+	+	X
fumecheng-13732	193	1	+	+	CCONJ
fumecheng-13732	194	1	−	−	VERB
fumecheng-13732	194	2	+	+	CCONJ
fumecheng-13732	194	3	−	−	ADJ
fumecheng-13732	194	4			VERB
fumecheng-13732	194	5			NOUN
fumecheng-13732	194	6			NOUN
fumecheng-13732	194	7			PROPN
fumecheng-13732	194	8			PROPN
fumecheng-13732	194	9			PROPN
fumecheng-13732	194	10			X
fumecheng-13732	194	11			X
fumecheng-13732	194	12			X
fumecheng-13732	194	13	(	(	PUNCT
fumecheng-13732	194	14	25	25	NUM
fumecheng-13732	194	15	)	)	PUNCT
fumecheng-13732	194	16	where	where	SCONJ
fumecheng-13732	194	17	a	a	PRON
fumecheng-13732	194	18	and	and	CCONJ
fumecheng-13732	194	19	b	b	NOUN
fumecheng-13732	194	20	are	be	AUX
fumecheng-13732	194	21	nonzero	nonzero	PROPN
fumecheng-13732	194	22	constants	constant	NOUN
fumecheng-13732	194	23	.	.	PUNCT
fumecheng-13732	195	1	now	now	ADV
fumecheng-13732	195	2	we	we	PRON
fumecheng-13732	195	3	use	use	VERB
fumecheng-13732	195	4	the	the	DET
fumecheng-13732	195	5	established	establish	VERB
fumecheng-13732	195	6	variational	variational	ADJ
fumecheng-13732	195	7	formulation	formulation	NOUN
fumecheng-13732	195	8	to	to	PART
fumecheng-13732	195	9	investigate	investigate	VERB
fumecheng-13732	195	10	the	the	DET
fumecheng-13732	195	11	pull	pull	VERB
fumecheng-13732	195	12	-	-	PUNCT
fumecheng-13732	195	13	in	in	ADP
fumecheng-13732	195	14	voltage	voltage	NOUN
fumecheng-13732	195	15	.	.	PUNCT
fumecheng-13732	196	1	before	before	ADP
fumecheng-13732	196	2	pull	pull	NOUN
fumecheng-13732	196	3	-	-	PUNCT
fumecheng-13732	196	4	in	in	ADP
fumecheng-13732	196	5	inability	inability	NOUN
fumecheng-13732	196	6	,	,	PUNCT
fumecheng-13732	196	7	the	the	DET
fumecheng-13732	196	8	kinetic	kinetic	ADJ
fumecheng-13732	196	9	energy	energy	NOUN
fumecheng-13732	196	10	and	and	CCONJ
fumecheng-13732	196	11	accelerated	accelerate	VERB
fumecheng-13732	196	12	velocity	velocity	NOUN
fumecheng-13732	196	13	tend	tend	VERB
fumecheng-13732	196	14	to	to	ADP
fumecheng-13732	196	15	zero	zero	NUM
fumecheng-13732	196	16	,	,	PUNCT
fumecheng-13732	196	17	under	under	ADP
fumecheng-13732	196	18	this	this	DET
fumecheng-13732	196	19	extreme	extreme	ADJ
fumecheng-13732	196	20	case	case	NOUN
fumecheng-13732	196	21	,	,	PUNCT
fumecheng-13732	196	22	we	we	PRON
fumecheng-13732	196	23	have	have	VERB
fumecheng-13732	196	24	:	:	PUNCT
fumecheng-13732	196	25	2	2	NUM
fumecheng-13732	196	26	31	31	NUM
fumecheng-13732	196	27	1	1	NUM
fumecheng-13732	196	28	(	(	PUNCT
fumecheng-13732	196	29	)	)	PUNCT
fumecheng-13732	196	30	2	2	NUM
fumecheng-13732	196	31	3	3	NUM
fumecheng-13732	196	32	j	j	PROPN
fumecheng-13732	196	33	w	w	PROPN
fumecheng-13732	196	34	w	w	PROPN
fumecheng-13732	196	35	w	w	PROPN
fumecheng-13732	196	36	mw	mw	PROPN
fumecheng-13732	196	37	dt	dt	NOUN
fumecheng-13732	196	38			ADP
fumecheng-13732	197	1			PROPN
fumecheng-13732	197	2	=	=	PUNCT
fumecheng-13732	198	1	−	−	PROPN
fumecheng-13732	199	1	+	+	CCONJ
fumecheng-13732	200	1	+	+	ADJ
fumecheng-13732	200	2			NUM
fumecheng-13732	200	3			NOUN
fumecheng-13732	201	1			PROPN
fumecheng-13732	201	2			PROPN
fumecheng-13732	201	3			X
fumecheng-13732	201	4	.	.	PUNCT
fumecheng-13732	202	1	(	(	PUNCT
fumecheng-13732	202	2	26	26	NUM
fumecheng-13732	202	3	)	)	PUNCT
fumecheng-13732	202	4	the	the	DET
fumecheng-13732	202	5	euler	euler	ADJ
fumecheng-13732	202	6	-	-	PUNCT
fumecheng-13732	202	7	lagrange	lagrange	NOUN
fumecheng-13732	202	8	equation	equation	NOUN
fumecheng-13732	202	9	becomes	become	VERB
fumecheng-13732	202	10	:	:	PUNCT
fumecheng-13732	202	11	2	2	NUM
fumecheng-13732	202	12	0w	0w	NUM
fumecheng-13732	202	13	w	w	PROPN
fumecheng-13732	202	14	m−	m−	PROPN
fumecheng-13732	202	15	+	+	PROPN
fumecheng-13732	202	16	+	+	CCONJ
fumecheng-13732	202	17	=	=	SYM
fumecheng-13732	202	18	(	(	PUNCT
fumecheng-13732	202	19	27	27	NUM
fumecheng-13732	202	20	)	)	PUNCT
fumecheng-13732	202	21	solving	solve	VERB
fumecheng-13732	202	22	m	m	VERB
fumecheng-13732	202	23	from	from	ADP
fumecheng-13732	202	24	eq	eq	ADP
fumecheng-13732	202	25	.	.	PUNCT
fumecheng-13732	203	1	(	(	PUNCT
fumecheng-13732	203	2	27	27	NUM
fumecheng-13732	203	3	)	)	PUNCT
fumecheng-13732	203	4	,	,	PUNCT
fumecheng-13732	203	5	and	and	CCONJ
fumecheng-13732	203	6	submitting	submit	VERB
fumecheng-13732	203	7	the	the	DET
fumecheng-13732	203	8	result	result	NOUN
fumecheng-13732	203	9	into	into	ADP
fumecheng-13732	203	10	eq	eq	NOUN
fumecheng-13732	203	11	.	.	PUNCT
fumecheng-13732	204	1	(	(	PUNCT
fumecheng-13732	204	2	7	7	NUM
fumecheng-13732	204	3	)	)	PUNCT
fumecheng-13732	204	4	,	,	PUNCT
fumecheng-13732	204	5	we	we	PRON
fumecheng-13732	204	6	have	have	VERB
fumecheng-13732	204	7	:	:	PUNCT
fumecheng-13732	204	8	2	2	NUM
fumecheng-13732	204	9	21	21	NUM
fumecheng-13732	204	10	(	(	PUNCT
fumecheng-13732	204	11	)	)	PUNCT
fumecheng-13732	205	1	ln(1	ln(1	ADJ
fumecheng-13732	205	2	)	)	PUNCT
fumecheng-13732	205	3	0	0	NUM
fumecheng-13732	205	4	2	2	NUM
fumecheng-13732	205	5	w	w	PROPN
fumecheng-13732	205	6	w	w	PROPN
fumecheng-13732	205	7	w	w	PROPN
fumecheng-13732	205	8	w+	w+	NOUN
fumecheng-13732	205	9	−	−	NOUN
fumecheng-13732	205	10	−	−	PROPN
fumecheng-13732	206	1	=	=	SYM
fumecheng-13732	206	2	(	(	PUNCT
fumecheng-13732	206	3	28	28	NUM
fumecheng-13732	206	4	)	)	PUNCT
fumecheng-13732	206	5	this	this	DET
fumecheng-13732	206	6	equation	equation	NOUN
fumecheng-13732	206	7	can	can	AUX
fumecheng-13732	206	8	be	be	AUX
fumecheng-13732	206	9	solved	solve	VERB
fumecheng-13732	206	10	by	by	ADP
fumecheng-13732	206	11	newton	newton	PROPN
fumecheng-13732	206	12	iteration	iteration	PROPN
fumecheng-13732	206	13	method	method	NOUN
fumecheng-13732	206	14	,	,	PUNCT
fumecheng-13732	206	15	here	here	ADV
fumecheng-13732	206	16	introduces	introduce	VERB
fumecheng-13732	206	17	an	an	DET
fumecheng-13732	206	18	ancient	ancient	ADJ
fumecheng-13732	206	19	chinese	chinese	ADJ
fumecheng-13732	206	20	algorithm	algorithm	NOUN
fumecheng-13732	206	21	[	[	X
fumecheng-13732	206	22	31	31	NUM
fumecheng-13732	206	23	,	,	PUNCT
fumecheng-13732	206	24	32	32	NUM
fumecheng-13732	206	25	]	]	PUNCT
fumecheng-13732	206	26	.	.	PUNCT
fumecheng-13732	207	1	we	we	PRON
fumecheng-13732	207	2	assume	assume	VERB
fumecheng-13732	207	3	two	two	NUM
fumecheng-13732	207	4	trial	trial	NOUN
fumecheng-13732	207	5	solutions	solution	NOUN
fumecheng-13732	207	6	w1=0.7	w1=0.7	PROPN
fumecheng-13732	207	7	and	and	CCONJ
fumecheng-13732	207	8	w2=0.75	w2=0.75	X
fumecheng-13732	207	9	,	,	PUNCT
fumecheng-13732	207	10	eq	eq	NOUN
fumecheng-13732	207	11	.	.	PUNCT
fumecheng-13732	208	1	(	(	PUNCT
fumecheng-13732	208	2	28	28	NUM
fumecheng-13732	208	3	)	)	PUNCT
fumecheng-13732	208	4	656	656	NUM
fumecheng-13732	208	5	j.h	j.h	NOUN
fumecheng-13732	208	6	.	.	PUNCT
fumecheng-13732	209	1	he	he	PRON
fumecheng-13732	209	2	,	,	PUNCT
fumecheng-13732	209	3	j.	j.	PROPN
fumecheng-13732	209	4	ma	ma	PROPN
fumecheng-13732	209	5	,	,	PUNCT
fumecheng-13732	209	6	a.a	a.a	PROPN
fumecheng-13732	209	7	.	.	PROPN
fumecheng-13732	209	8	alsolam	alsolam	PROPN
fumecheng-13732	209	9	,	,	PUNCT
fumecheng-13732	209	10	c.h	c.h	PROPN
fumecheng-13732	209	11	.	.	PUNCT
fumecheng-13732	210	1	he	he	PRON
fumecheng-13732	210	2	produces	produce	VERB
fumecheng-13732	210	3	the	the	DET
fumecheng-13732	210	4	residuals	residual	NOUN
fumecheng-13732	210	5	r1=	r1=	NOUN
fumecheng-13732	210	6	-0.007834	-0.007834	NOUN
fumecheng-13732	210	7	and	and	CCONJ
fumecheng-13732	210	8	r2=0.06249	r2=0.06249	PROPN
fumecheng-13732	210	9	.	.	PUNCT
fumecheng-13732	211	1	the	the	DET
fumecheng-13732	211	2	ancient	ancient	ADJ
fumecheng-13732	211	3	chinese	chinese	ADJ
fumecheng-13732	211	4	algorithm	algorithm	NOUN
fumecheng-13732	211	5	results	result	NOUN
fumecheng-13732	211	6	in	in	ADP
fumecheng-13732	211	7	the	the	DET
fumecheng-13732	211	8	following	follow	VERB
fumecheng-13732	211	9	approximate	approximate	ADJ
fumecheng-13732	211	10	solution	solution	NOUN
fumecheng-13732	211	11	:	:	PUNCT
fumecheng-13732	211	12	1	1	NUM
fumecheng-13732	211	13	2	2	NUM
fumecheng-13732	211	14	2	2	NUM
fumecheng-13732	211	15	1	1	NUM
fumecheng-13732	211	16	1	1	NUM
fumecheng-13732	211	17	2	2	NUM
fumecheng-13732	211	18	0.71	0.71	NUM
fumecheng-13732	211	19	r	r	NOUN
fumecheng-13732	211	20	w	w	NOUN
fumecheng-13732	211	21	r	r	NOUN
fumecheng-13732	211	22	w	w	PROPN
fumecheng-13732	211	23	w	w	NOUN
fumecheng-13732	211	24	r	r	NOUN
fumecheng-13732	211	25	r	r	NOUN
fumecheng-13732	211	26	−	−	NOUN
fumecheng-13732	212	1	=	=	SYM
fumecheng-13732	213	1	=	=	NOUN
fumecheng-13732	214	1	−	−	PROPN
fumecheng-13732	214	2	.	.	PUNCT
fumecheng-13732	215	1	(	(	PUNCT
fumecheng-13732	215	2	29	29	NUM
fumecheng-13732	215	3	)	)	PUNCT
fumecheng-13732	215	4	we	we	PRON
fumecheng-13732	215	5	choose	choose	VERB
fumecheng-13732	215	6	w3=0.71	w3=0.71	NOUN
fumecheng-13732	215	7	,	,	PUNCT
fumecheng-13732	215	8	and	and	CCONJ
fumecheng-13732	215	9	the	the	DET
fumecheng-13732	215	10	residual	residual	ADJ
fumecheng-13732	215	11	is	be	AUX
fumecheng-13732	215	12	r3=-0.001737	r3=-0.001737	NOUN
fumecheng-13732	215	13	,	,	PUNCT
fumecheng-13732	215	14	which	which	PRON
fumecheng-13732	215	15	leads	lead	VERB
fumecheng-13732	215	16	to	to	ADP
fumecheng-13732	215	17	:	:	PUNCT
fumecheng-13732	215	18	1	1	NUM
fumecheng-13732	215	19	3	3	NUM
fumecheng-13732	215	20	3	3	NUM
fumecheng-13732	215	21	1	1	NUM
fumecheng-13732	215	22	1	1	NUM
fumecheng-13732	215	23	3	3	NUM
fumecheng-13732	215	24	0.7128	0.7128	NUM
fumecheng-13732	215	25	r	r	NOUN
fumecheng-13732	215	26	w	w	NOUN
fumecheng-13732	215	27	r	r	NOUN
fumecheng-13732	215	28	w	w	PROPN
fumecheng-13732	215	29	w	w	NOUN
fumecheng-13732	215	30	r	r	NOUN
fumecheng-13732	215	31	r	r	NOUN
fumecheng-13732	215	32	−	−	NOUN
fumecheng-13732	215	33	=	=	SYM
fumecheng-13732	215	34	=	=	NOUN
fumecheng-13732	215	35	−	−	PROPN
fumecheng-13732	215	36	.	.	PUNCT
fumecheng-13732	216	1	(	(	PUNCT
fumecheng-13732	216	2	30	30	NUM
fumecheng-13732	216	3	)	)	PUNCT
fumecheng-13732	216	4	the	the	DET
fumecheng-13732	216	5	pull	pull	NOUN
fumecheng-13732	216	6	-	-	PUNCT
fumecheng-13732	216	7	in	in	ADP
fumecheng-13732	216	8	voltage	voltage	NOUN
fumecheng-13732	216	9	can	can	AUX
fumecheng-13732	216	10	be	be	AUX
fumecheng-13732	216	11	calculated	calculate	VERB
fumecheng-13732	216	12	as	as	ADP
fumecheng-13732	216	13	:	:	PUNCT
fumecheng-13732	216	14	2	2	NUM
fumecheng-13732	216	15	*	*	NUM
fumecheng-13732	216	16	0.2045	0.2045	NUM
fumecheng-13732	216	17	m	m	NOUN
fumecheng-13732	216	18	w	w	NOUN
fumecheng-13732	216	19	w=	w=	NOUN
fumecheng-13732	216	20	−	−	PROPN
fumecheng-13732	217	1	=	=	PUNCT
fumecheng-13732	217	2	.	.	PUNCT
fumecheng-13732	218	1	(	(	PUNCT
fumecheng-13732	218	2	31	31	NUM
fumecheng-13732	218	3	)	)	PUNCT
fumecheng-13732	218	4	the	the	DET
fumecheng-13732	218	5	precise	precise	ADJ
fumecheng-13732	218	6	value	value	NOUN
fumecheng-13732	218	7	is	be	AUX
fumecheng-13732	218	8	0.203632188	0.203632188	NUM
fumecheng-13732	218	9	,	,	PUNCT
fumecheng-13732	218	10	as	as	SCONJ
fumecheng-13732	218	11	demonstrated	demonstrate	VERB
fumecheng-13732	218	12	in	in	ADP
fumecheng-13732	218	13	fig	fig	NOUN
fumecheng-13732	218	14	.	.	PUNCT
fumecheng-13732	219	1	1	1	NUM
fumecheng-13732	219	2	,	,	PUNCT
fumecheng-13732	219	3	which	which	PRON
fumecheng-13732	219	4	illustrates	illustrate	VERB
fumecheng-13732	219	5	the	the	DET
fumecheng-13732	219	6	phase	phase	NOUN
fumecheng-13732	219	7	-	-	PUNCT
fumecheng-13732	219	8	space	space	NOUN
fumecheng-13732	219	9	dynamics	dynamic	NOUN
fumecheng-13732	219	10	of	of	ADP
fumecheng-13732	219	11	the	the	DET
fumecheng-13732	219	12	mems	mem	NOUN
fumecheng-13732	219	13	oscillator	oscillator	NOUN
fumecheng-13732	219	14	by	by	ADP
fumecheng-13732	219	15	plotting	plot	VERB
fumecheng-13732	219	16	dimensionless	dimensionless	ADJ
fumecheng-13732	219	17	velocity	velocity	NOUN
fumecheng-13732	219	18	against	against	ADP
fumecheng-13732	219	19	displacement	displacement	NOUN
fumecheng-13732	219	20	for	for	ADP
fumecheng-13732	219	21	varying	vary	VERB
fumecheng-13732	219	22	voltage	voltage	NOUN
fumecheng-13732	219	23	-	-	PUNCT
fumecheng-13732	219	24	related	relate	VERB
fumecheng-13732	219	25	parameter	parameter	NOUN
fumecheng-13732	219	26	.	.	PUNCT
fumecheng-13732	220	1	fig	fig	NOUN
fumecheng-13732	220	2	.	.	PUNCT
fumecheng-13732	221	1	1	1	NUM
fumecheng-13732	221	2	phase	phase	NOUN
fumecheng-13732	221	3	trajectories	trajectory	NOUN
fumecheng-13732	221	4	for	for	ADP
fumecheng-13732	221	5	m=0.05	m=0.05	NOUN
fumecheng-13732	221	6	,	,	PUNCT
fumecheng-13732	221	7	0.1	0.1	NUM
fumecheng-13732	221	8	,	,	PUNCT
fumecheng-13732	221	9	0.15	0.15	NUM
fumecheng-13732	221	10	,	,	PUNCT
fumecheng-13732	221	11	and	and	CCONJ
fumecheng-13732	221	12	0.203632189	0.203632189	NUM
fumecheng-13732	221	13	sub	sub	ADJ
fumecheng-13732	221	14	-	-	ADJ
fumecheng-13732	221	15	critical	critical	ADJ
fumecheng-13732	221	16	voltage	voltage	NOUN
fumecheng-13732	221	17	behavior	behavior	NOUN
fumecheng-13732	221	18	manifests	manifest	VERB
fumecheng-13732	221	19	when	when	SCONJ
fumecheng-13732	221	20	m	m	VERB
fumecheng-13732	221	21	<	<	X
fumecheng-13732	221	22	m	m	PROPN
fumecheng-13732	221	23	*	*	NOUN
fumecheng-13732	221	24	.	.	PUNCT
fumecheng-13732	222	1	for	for	ADP
fumecheng-13732	222	2	values	value	NOUN
fumecheng-13732	222	3	of	of	ADP
fumecheng-13732	222	4	m	m	PRON
fumecheng-13732	222	5	ranging	range	VERB
fumecheng-13732	222	6	from	from	ADP
fumecheng-13732	222	7	0.05	0.05	NUM
fumecheng-13732	222	8	to	to	ADP
fumecheng-13732	222	9	0.15	0.15	NUM
fumecheng-13732	222	10	,	,	PUNCT
fumecheng-13732	222	11	the	the	DET
fumecheng-13732	222	12	trajectories	trajectory	NOUN
fumecheng-13732	222	13	exhibit	exhibit	VERB
fumecheng-13732	222	14	closed	closed	ADJ
fumecheng-13732	222	15	,	,	PUNCT
fumecheng-13732	222	16	elliptical	elliptical	ADJ
fumecheng-13732	222	17	loops	loop	NOUN
fumecheng-13732	222	18	,	,	PUNCT
fumecheng-13732	222	19	thereby	thereby	ADV
fumecheng-13732	222	20	directly	directly	ADV
fumecheng-13732	222	21	corresponding	correspond	VERB
fumecheng-13732	222	22	to	to	ADP
fumecheng-13732	222	23	periodic	periodic	ADJ
fumecheng-13732	222	24	solutions	solution	NOUN
fumecheng-13732	222	25	where	where	SCONJ
fumecheng-13732	222	26	electrostatic	electrostatic	ADJ
fumecheng-13732	222	27	and	and	CCONJ
fumecheng-13732	222	28	mechanical	mechanical	ADJ
fumecheng-13732	222	29	forces	force	NOUN
fumecheng-13732	222	30	maintain	maintain	VERB
fumecheng-13732	222	31	stable	stable	ADJ
fumecheng-13732	222	32	equilibrium	equilibrium	NOUN
fumecheng-13732	222	33	.	.	PUNCT
fumecheng-13732	223	1	these	these	DET
fumecheng-13732	223	2	loops	loop	NOUN
fumecheng-13732	223	3	remain	remain	VERB
fumecheng-13732	223	4	constrained	constrain	VERB
fumecheng-13732	223	5	within	within	ADP
fumecheng-13732	223	6	the	the	DET
fumecheng-13732	223	7	range	range	NOUN
fumecheng-13732	223	8	of	of	ADP
fumecheng-13732	223	9	values	value	NOUN
fumecheng-13732	223	10	0	0	PUNCT
fumecheng-13732	224	1	<	<	X
fumecheng-13732	224	2	w	w	X
fumecheng-13732	224	3	<	<	X
fumecheng-13732	224	4	w	w	PROPN
fumecheng-13732	224	5	*	*	PUNCT
fumecheng-13732	224	6	,	,	PUNCT
fumecheng-13732	224	7	thereby	thereby	ADV
fumecheng-13732	224	8	confirming	confirm	VERB
fumecheng-13732	224	9	that	that	SCONJ
fumecheng-13732	224	10	kinetic	kinetic	ADJ
fumecheng-13732	224	11	energy	energy	NOUN
fumecheng-13732	224	12	and	and	CCONJ
fumecheng-13732	224	13	acceleration	acceleration	NOUN
fumecheng-13732	224	14	never	never	ADV
fumecheng-13732	224	15	simultaneously	simultaneously	ADV
fumecheng-13732	224	16	reach	reach	VERB
fumecheng-13732	224	17	zero	zero	NUM
fumecheng-13732	224	18	—	—	PUNCT
fumecheng-13732	224	19	a	a	DET
fumecheng-13732	224	20	finding	finding	NOUN
fumecheng-13732	224	21	that	that	PRON
fumecheng-13732	224	22	is	be	AUX
fumecheng-13732	224	23	consistent	consistent	ADJ
fumecheng-13732	224	24	with	with	ADP
fumecheng-13732	224	25	the	the	DET
fumecheng-13732	224	26	established	establish	VERB
fumecheng-13732	224	27	pull	pull	NOUN
fumecheng-13732	224	28	-	-	PUNCT
fumecheng-13732	224	29	in	in	ADP
fumecheng-13732	224	30	criterion	criterion	NOUN
fumecheng-13732	224	31	.	.	PUNCT
fumecheng-13732	225	1	the	the	DET
fumecheng-13732	225	2	critical	critical	ADJ
fumecheng-13732	225	3	voltage	voltage	NOUN
fumecheng-13732	225	4	behavior	behavior	NOUN
fumecheng-13732	225	5	emerges	emerge	VERB
fumecheng-13732	225	6	when	when	SCONJ
fumecheng-13732	225	7	the	the	DET
fumecheng-13732	225	8	parameter	parameter	NOUN
fumecheng-13732	225	9	m	m	VERB
fumecheng-13732	225	10	is	be	AUX
fumecheng-13732	225	11	equal	equal	ADJ
fumecheng-13732	225	12	to	to	ADP
fumecheng-13732	225	13	m	m	PROPN
fumecheng-13732	225	14	*	*	NOUN
fumecheng-13732	225	15	.	.	PUNCT
fumecheng-13732	226	1	the	the	DET
fumecheng-13732	226	2	innermost	innermost	PROPN
fumecheng-13732	226	3	trajectory	trajectory	NOUN
fumecheng-13732	226	4	,	,	PUNCT
fumecheng-13732	226	5	collapsing	collapse	VERB
fumecheng-13732	226	6	to	to	ADP
fumecheng-13732	226	7	a	a	DET
fumecheng-13732	226	8	point	point	NOUN
fumecheng-13732	226	9	near	near	ADP
fumecheng-13732	226	10	w	w	PROPN
fumecheng-13732	226	11	=	=	PUNCT
fumecheng-13732	226	12	w	w	PROPN
fumecheng-13732	226	13	*	*	PUNCT
fumecheng-13732	226	14	,	,	PUNCT
fumecheng-13732	226	15	visualizes	visualize	VERB
fumecheng-13732	226	16	the	the	DET
fumecheng-13732	226	17	threshold	threshold	NOUN
fumecheng-13732	226	18	at	at	ADP
fumecheng-13732	226	19	which	which	PRON
fumecheng-13732	226	20	the	the	DET
fumecheng-13732	226	21	system	system	NOUN
fumecheng-13732	226	22	teeters	teeter	VERB
fumecheng-13732	226	23	on	on	ADP
fumecheng-13732	226	24	instability	instability	NOUN
fumecheng-13732	226	25	.	.	PUNCT
fumecheng-13732	227	1	the	the	DET
fumecheng-13732	227	2	loop	loop	NOUN
fumecheng-13732	227	3	contracts	contract	NOUN
fumecheng-13732	227	4	towards	towards	ADP
fumecheng-13732	227	5	a	a	DET
fumecheng-13732	227	6	singularity	singularity	NOUN
fumecheng-13732	227	7	,	,	PUNCT
fumecheng-13732	227	8	thereby	thereby	ADV
fumecheng-13732	227	9	satisfying	satisfy	VERB
fumecheng-13732	227	10	the	the	DET
fumecheng-13732	227	11	pull	pull	VERB
fumecheng-13732	227	12	-	-	PUNCT
fumecheng-13732	227	13	in	in	ADP
fumecheng-13732	227	14	condition	condition	NOUN
fumecheng-13732	227	15	:	:	PUNCT
fumecheng-13732	227	16	when	when	SCONJ
fumecheng-13732	227	17	m	m	VERB
fumecheng-13732	227	18	=	=	NOUN
fumecheng-13732	227	19	m	m	PROPN
fumecheng-13732	227	20	*	*	NOUN
fumecheng-13732	227	21	,	,	PUNCT
fumecheng-13732	227	22	the	the	DET
fumecheng-13732	227	23	kinetic	kinetic	ADJ
fumecheng-13732	227	24	energy	energy	NOUN
fumecheng-13732	227	25	and	and	CCONJ
fumecheng-13732	227	26	acceleration	acceleration	NOUN
fumecheng-13732	227	27	simultaneously	simultaneously	ADV
fumecheng-13732	227	28	approach	approach	VERB
fumecheng-13732	227	29	zero	zero	NUM
fumecheng-13732	227	30	.	.	PUNCT
fumecheng-13732	228	1	this	this	DET
fumecheng-13732	228	2	phase	phase	NOUN
fumecheng-13732	228	3	transition	transition	NOUN
fumecheng-13732	228	4	serves	serve	VERB
fumecheng-13732	228	5	to	to	PART
fumecheng-13732	228	6	substantiate	substantiate	VERB
fumecheng-13732	228	7	the	the	DET
fumecheng-13732	228	8	variational	variational	ADJ
fumecheng-13732	228	9	principle	principle	NOUN
fumecheng-13732	228	10	's	's	PART
fumecheng-13732	228	11	forecast	forecast	NOUN
fumecheng-13732	228	12	of	of	ADP
fumecheng-13732	228	13	a	a	DET
fumecheng-13732	228	14	welldefined	welldefine	VERB
fumecheng-13732	228	15	boundary	boundary	NOUN
fumecheng-13732	228	16	between	between	ADP
fumecheng-13732	228	17	stable	stable	ADJ
fumecheng-13732	228	18	oscillation	oscillation	NOUN
fumecheng-13732	228	19	and	and	CCONJ
fumecheng-13732	228	20	pull	pull	NOUN
fumecheng-13732	228	21	-	-	PUNCT
fumecheng-13732	228	22	in	in	ADP
fumecheng-13732	228	23	motion	motion	NOUN
fumecheng-13732	228	24	.	.	PUNCT
fumecheng-13732	229	1	variational	variational	ADJ
fumecheng-13732	229	2	approach	approach	NOUN
fumecheng-13732	229	3	to	to	ADP
fumecheng-13732	229	4	micro	micro	ADJ
fumecheng-13732	229	5	-	-	ADJ
fumecheng-13732	229	6	electro	electro	ADJ
fumecheng-13732	229	7	-	-	PUNCT
fumecheng-13732	229	8	mechanical	mechanical	ADJ
fumecheng-13732	229	9	systems	system	NOUN
fumecheng-13732	229	10	657	657	NUM
fumecheng-13732	229	11	equation	equation	NOUN
fumecheng-13732	229	12	(	(	PUNCT
fumecheng-13732	229	13	31	31	NUM
fumecheng-13732	229	14	)	)	PUNCT
fumecheng-13732	229	15	demonstrates	demonstrate	VERB
fumecheng-13732	229	16	a	a	DET
fumecheng-13732	229	17	notable	notable	ADJ
fumecheng-13732	229	18	level	level	NOUN
fumecheng-13732	229	19	of	of	ADP
fumecheng-13732	229	20	precision	precision	NOUN
fumecheng-13732	229	21	.	.	PUNCT
fumecheng-13732	230	1	it	it	PRON
fumecheng-13732	230	2	is	be	AUX
fumecheng-13732	230	3	noteworthy	noteworthy	ADJ
fumecheng-13732	230	4	that	that	SCONJ
fumecheng-13732	230	5	the	the	DET
fumecheng-13732	230	6	ancient	ancient	ADJ
fumecheng-13732	230	7	chinese	chinese	ADJ
fumecheng-13732	230	8	algorithm	algorithm	NOUN
fumecheng-13732	230	9	attains	attain	VERB
fumecheng-13732	230	10	higher	high	ADJ
fumecheng-13732	230	11	accuracy	accuracy	NOUN
fumecheng-13732	230	12	with	with	ADP
fumecheng-13732	230	13	a	a	DET
fumecheng-13732	230	14	single	single	ADJ
fumecheng-13732	230	15	iteration	iteration	NOUN
fumecheng-13732	230	16	,	,	PUNCT
fumecheng-13732	230	17	underscoring	underscore	VERB
fumecheng-13732	230	18	its	its	PRON
fumecheng-13732	230	19	property	property	NOUN
fumecheng-13732	230	20	of	of	ADP
fumecheng-13732	230	21	rapid	rapid	ADJ
fumecheng-13732	230	22	convergence	convergence	NOUN
fumecheng-13732	230	23	to	to	ADP
fumecheng-13732	230	24	a	a	DET
fumecheng-13732	230	25	substantial	substantial	ADJ
fumecheng-13732	230	26	level	level	NOUN
fumecheng-13732	230	27	of	of	ADP
fumecheng-13732	230	28	precision	precision	NOUN
fumecheng-13732	230	29	.	.	PUNCT
fumecheng-13732	231	1	in	in	ADP
fumecheng-13732	231	2	addition	addition	NOUN
fumecheng-13732	231	3	,	,	PUNCT
fumecheng-13732	231	4	the	the	DET
fumecheng-13732	231	5	variational	variational	ADJ
fumecheng-13732	231	6	principle	principle	NOUN
fumecheng-13732	231	7	facilitates	facilitate	VERB
fumecheng-13732	231	8	precise	precise	ADJ
fumecheng-13732	231	9	voltage	voltage	NOUN
fumecheng-13732	231	10	-	-	PUNCT
fumecheng-13732	231	11	controlled	control	VERB
fumecheng-13732	231	12	manipulation	manipulation	NOUN
fumecheng-13732	231	13	,	,	PUNCT
fumecheng-13732	231	14	thereby	thereby	ADV
fumecheng-13732	231	15	providing	provide	VERB
fumecheng-13732	231	16	a	a	DET
fumecheng-13732	231	17	robust	robust	ADJ
fumecheng-13732	231	18	framework	framework	NOUN
fumecheng-13732	231	19	for	for	ADP
fumecheng-13732	231	20	highly	highly	ADV
fumecheng-13732	231	21	accurate	accurate	ADJ
fumecheng-13732	231	22	voltage	voltage	NOUN
fumecheng-13732	231	23	regulation	regulation	NOUN
fumecheng-13732	231	24	.	.	PUNCT
fumecheng-13732	232	1	the	the	DET
fumecheng-13732	232	2	synergy	synergy	NOUN
fumecheng-13732	232	3	between	between	ADP
fumecheng-13732	232	4	the	the	DET
fumecheng-13732	232	5	specified	specify	VERB
fumecheng-13732	232	6	pull	pull	NOUN
fumecheng-13732	232	7	-	-	PUNCT
fumecheng-13732	232	8	in	in	ADP
fumecheng-13732	232	9	voltage	voltage	NOUN
fumecheng-13732	232	10	value	value	NOUN
fumecheng-13732	232	11	,	,	PUNCT
fumecheng-13732	232	12	the	the	DET
fumecheng-13732	232	13	efficacy	efficacy	NOUN
fumecheng-13732	232	14	of	of	ADP
fumecheng-13732	232	15	the	the	DET
fumecheng-13732	232	16	algorithm	algorithm	NOUN
fumecheng-13732	232	17	,	,	PUNCT
fumecheng-13732	232	18	and	and	CCONJ
fumecheng-13732	232	19	the	the	DET
fumecheng-13732	232	20	precision	precision	NOUN
fumecheng-13732	232	21	of	of	ADP
fumecheng-13732	232	22	the	the	DET
fumecheng-13732	232	23	variational	variational	ADJ
fumecheng-13732	232	24	principle	principle	NOUN
fumecheng-13732	232	25	underscores	underscore	VERB
fumecheng-13732	232	26	their	their	PRON
fumecheng-13732	232	27	collective	collective	ADJ
fumecheng-13732	232	28	potential	potential	NOUN
fumecheng-13732	232	29	for	for	ADP
fumecheng-13732	232	30	facilitating	facilitate	VERB
fumecheng-13732	232	31	precise	precise	ADJ
fumecheng-13732	232	32	and	and	CCONJ
fumecheng-13732	232	33	regulated	regulated	ADJ
fumecheng-13732	232	34	operations	operation	NOUN
fumecheng-13732	232	35	in	in	ADP
fumecheng-13732	232	36	the	the	DET
fumecheng-13732	232	37	domains	domain	NOUN
fumecheng-13732	232	38	of	of	ADP
fumecheng-13732	232	39	mems	mem	NOUN
fumecheng-13732	232	40	design	design	NOUN
fumecheng-13732	232	41	and	and	CCONJ
fumecheng-13732	232	42	optimization	optimization	NOUN
fumecheng-13732	232	43	.	.	PUNCT
fumecheng-13732	233	1	fig	fig	NOUN
fumecheng-13732	233	2	.	.	PUNCT
fumecheng-13732	234	1	2	2	NUM
fumecheng-13732	234	2	demonstrates	demonstrate	VERB
fumecheng-13732	234	3	that	that	SCONJ
fumecheng-13732	234	4	when	when	SCONJ
fumecheng-13732	234	5	m	m	VERB
fumecheng-13732	234	6	<	<	X
fumecheng-13732	234	7	m	m	PROPN
fumecheng-13732	234	8	*	*	NOUN
fumecheng-13732	234	9	or	or	CCONJ
fumecheng-13732	234	10	w	w	ADP
fumecheng-13732	234	11	<	<	X
fumecheng-13732	234	12	w	w	PROPN
fumecheng-13732	234	13	*	*	NOUN
fumecheng-13732	234	14	,	,	PUNCT
fumecheng-13732	234	15	the	the	DET
fumecheng-13732	234	16	system	system	NOUN
fumecheng-13732	234	17	exhibits	exhibit	VERB
fumecheng-13732	234	18	periodic	periodic	ADJ
fumecheng-13732	234	19	solutions	solution	NOUN
fumecheng-13732	234	20	.	.	PUNCT
fumecheng-13732	235	1	however	however	ADV
fumecheng-13732	235	2	,	,	PUNCT
fumecheng-13732	235	3	as	as	ADP
fumecheng-13732	235	4	the	the	DET
fumecheng-13732	235	5	voltage	voltage	NOUN
fumecheng-13732	235	6	parameter	parameter	NOUN
fumecheng-13732	235	7	m	m	NOUN
fumecheng-13732	235	8	increases	increase	NOUN
fumecheng-13732	235	9	,	,	PUNCT
fumecheng-13732	235	10	the	the	DET
fumecheng-13732	235	11	displacement	displacement	NOUN
fumecheng-13732	235	12	,	,	PUNCT
fumecheng-13732	235	13	w	w	PROPN
fumecheng-13732	235	14	,	,	PUNCT
fumecheng-13732	235	15	approaches	approach	VERB
fumecheng-13732	235	16	its	its	PRON
fumecheng-13732	235	17	threshold	threshold	NOUN
fumecheng-13732	235	18	value	value	NOUN
fumecheng-13732	235	19	,	,	PUNCT
fumecheng-13732	235	20	w	w	PROPN
fumecheng-13732	235	21	*	*	NOUN
fumecheng-13732	235	22	.	.	PUNCT
fumecheng-13732	236	1	fig	fig	NOUN
fumecheng-13732	236	2	.	.	PUNCT
fumecheng-13732	237	1	2	2	NUM
fumecheng-13732	237	2	periodic	periodic	ADJ
fumecheng-13732	237	3	solution	solution	NOUN
fumecheng-13732	237	4	for	for	ADP
fumecheng-13732	237	5	m	m	NOUN
fumecheng-13732	237	6	<	<	X
fumecheng-13732	237	7	m	m	PROPN
fumecheng-13732	237	8	*	*	VERB
fumecheng-13732	237	9	once	once	ADV
fumecheng-13732	237	10	w	w	PROPN
fumecheng-13732	237	11	exceeds	exceed	VERB
fumecheng-13732	237	12	w	w	PROPN
fumecheng-13732	237	13	*	*	NOUN
fumecheng-13732	237	14	,	,	PUNCT
fumecheng-13732	237	15	pull	pull	NOUN
fumecheng-13732	237	16	-	-	PUNCT
fumecheng-13732	237	17	in	in	ADP
fumecheng-13732	237	18	motion	motion	NOUN
fumecheng-13732	237	19	occurs	occur	VERB
fumecheng-13732	237	20	,	,	PUNCT
fumecheng-13732	237	21	as	as	SCONJ
fumecheng-13732	237	22	shown	show	VERB
fumecheng-13732	237	23	in	in	ADP
fumecheng-13732	237	24	fig	fig	NOUN
fumecheng-13732	237	25	.	.	PUNCT
fumecheng-13732	238	1	3	3	X
fumecheng-13732	238	2	.	.	X
fumecheng-13732	239	1	in	in	ADP
fumecheng-13732	239	2	contrast	contrast	NOUN
fumecheng-13732	239	3	to	to	ADP
fumecheng-13732	239	4	the	the	DET
fumecheng-13732	239	5	periodic	periodic	ADJ
fumecheng-13732	239	6	behavior	behavior	NOUN
fumecheng-13732	239	7	observed	observe	VERB
fumecheng-13732	239	8	in	in	ADP
fumecheng-13732	239	9	fig	fig	NOUN
fumecheng-13732	239	10	.	.	PUNCT
fumecheng-13732	240	1	2	2	NUM
fumecheng-13732	240	2	,	,	PUNCT
fumecheng-13732	240	3	where	where	SCONJ
fumecheng-13732	240	4	the	the	DET
fumecheng-13732	240	5	dimensionless	dimensionless	ADJ
fumecheng-13732	240	6	displacement	displacement	ADJ
fumecheng-13732	240	7	oscillates	oscillate	NOUN
fumecheng-13732	240	8	within	within	ADP
fumecheng-13732	240	9	the	the	DET
fumecheng-13732	240	10	bounded	bounded	ADJ
fumecheng-13732	240	11	range	range	NOUN
fumecheng-13732	240	12	,	,	PUNCT
fumecheng-13732	240	13	0	0	PUNCT
fumecheng-13732	240	14	<	<	X
fumecheng-13732	240	15	w	w	X
fumecheng-13732	240	16	<	<	X
fumecheng-13732	240	17	w	w	NOUN
fumecheng-13732	240	18	*	*	NOUN
fumecheng-13732	240	19	,	,	PUNCT
fumecheng-13732	240	20	under	under	ADP
fumecheng-13732	240	21	sub	sub	ADJ
fumecheng-13732	240	22	-	-	ADJ
fumecheng-13732	240	23	critical	critical	ADJ
fumecheng-13732	240	24	voltages	voltage	NOUN
fumecheng-13732	240	25	(	(	PUNCT
fumecheng-13732	240	26	m	m	X
fumecheng-13732	240	27	<	<	X
fumecheng-13732	240	28	m	m	PROPN
fumecheng-13732	240	29	*	*	NOUN
fumecheng-13732	240	30	)	)	PUNCT
fumecheng-13732	240	31	,	,	PUNCT
fumecheng-13732	240	32	the	the	DET
fumecheng-13732	240	33	dynamics	dynamic	NOUN
fumecheng-13732	240	34	depicted	depict	VERB
fumecheng-13732	240	35	in	in	ADP
fumecheng-13732	240	36	fig	fig	NOUN
fumecheng-13732	240	37	.	.	PUNCT
fumecheng-13732	241	1	3	3	NUM
fumecheng-13732	241	2	reveal	reveal	VERB
fumecheng-13732	241	3	a	a	DET
fumecheng-13732	241	4	striking	striking	ADJ
fumecheng-13732	241	5	shift	shift	NOUN
fumecheng-13732	241	6	when	when	SCONJ
fumecheng-13732	241	7	m	m	NOUN
fumecheng-13732	241	8	exceeds	exceed	VERB
fumecheng-13732	241	9	the	the	DET
fumecheng-13732	241	10	critical	critical	ADJ
fumecheng-13732	241	11	threshold	threshold	NOUN
fumecheng-13732	241	12	,	,	PUNCT
fumecheng-13732	241	13	m	m	PROPN
fumecheng-13732	241	14	*	*	NOUN
fumecheng-13732	241	15	.	.	PUNCT
fumecheng-13732	242	1	here	here	ADV
fumecheng-13732	242	2	,	,	PUNCT
fumecheng-13732	242	3	w	w	NOUN
fumecheng-13732	242	4	abandons	abandon	VERB
fumecheng-13732	242	5	all	all	DET
fumecheng-13732	242	6	oscillatory	oscillatory	ADJ
fumecheng-13732	242	7	characteristics	characteristic	NOUN
fumecheng-13732	242	8	and	and	CCONJ
fumecheng-13732	242	9	instead	instead	ADV
fumecheng-13732	242	10	increases	increase	VERB
fumecheng-13732	242	11	monotonically	monotonically	ADV
fumecheng-13732	242	12	,	,	PUNCT
fumecheng-13732	242	13	advancing	advance	VERB
fumecheng-13732	242	14	relentlessly	relentlessly	ADV
fumecheng-13732	242	15	toward	toward	ADP
fumecheng-13732	242	16	the	the	DET
fumecheng-13732	242	17	singularity	singularity	NOUN
fumecheng-13732	242	18	at	at	ADP
fumecheng-13732	242	19	w=1	w=1	PROPN
fumecheng-13732	242	20	.	.	PUNCT
fumecheng-13732	243	1	this	this	DET
fumecheng-13732	243	2	unidirectional	unidirectional	ADJ
fumecheng-13732	243	3	trajectory	trajectory	NOUN
fumecheng-13732	243	4	signifies	signify	VERB
fumecheng-13732	243	5	an	an	DET
fumecheng-13732	243	6	irreversible	irreversible	ADJ
fumecheng-13732	243	7	pullin	pullin	PROPN
fumecheng-13732	243	8	motion	motion	NOUN
fumecheng-13732	243	9	,	,	PUNCT
fumecheng-13732	243	10	a	a	DET
fumecheng-13732	243	11	catastrophic	catastrophic	ADJ
fumecheng-13732	243	12	transition	transition	NOUN
fumecheng-13732	243	13	driven	drive	VERB
fumecheng-13732	243	14	by	by	ADP
fumecheng-13732	243	15	the	the	DET
fumecheng-13732	243	16	breakdown	breakdown	NOUN
fumecheng-13732	243	17	of	of	ADP
fumecheng-13732	243	18	the	the	DET
fumecheng-13732	243	19	delicate	delicate	ADJ
fumecheng-13732	243	20	balance	balance	NOUN
fumecheng-13732	243	21	between	between	ADP
fumecheng-13732	243	22	electrostatic	electrostatic	ADJ
fumecheng-13732	243	23	and	and	CCONJ
fumecheng-13732	243	24	mechanical	mechanical	ADJ
fumecheng-13732	243	25	forces	force	NOUN
fumecheng-13732	243	26	that	that	PRON
fumecheng-13732	243	27	governs	govern	VERB
fumecheng-13732	243	28	stable	stable	ADJ
fumecheng-13732	243	29	operation	operation	NOUN
fumecheng-13732	243	30	.	.	PUNCT
fumecheng-13732	244	1	in	in	ADP
fumecheng-13732	244	2	the	the	DET
fumecheng-13732	244	3	sub	sub	ADJ
fumecheng-13732	244	4	-	-	ADJ
fumecheng-13732	244	5	critical	critical	ADJ
fumecheng-13732	244	6	regime	regime	NOUN
fumecheng-13732	244	7	(	(	PUNCT
fumecheng-13732	244	8	fig	fig	NOUN
fumecheng-13732	244	9	.	.	PUNCT
fumecheng-13732	244	10	2	2	NUM
fumecheng-13732	244	11	)	)	PUNCT
fumecheng-13732	244	12	,	,	PUNCT
fumecheng-13732	244	13	mechanical	mechanical	ADJ
fumecheng-13732	244	14	restoring	restore	VERB
fumecheng-13732	244	15	forces	force	NOUN
fumecheng-13732	244	16	—	—	PUNCT
fumecheng-13732	244	17	rooted	root	VERB
fumecheng-13732	244	18	in	in	ADP
fumecheng-13732	244	19	the	the	DET
fumecheng-13732	244	20	elastic	elastic	ADJ
fumecheng-13732	244	21	properties	property	NOUN
fumecheng-13732	244	22	of	of	ADP
fumecheng-13732	244	23	the	the	DET
fumecheng-13732	244	24	mems	mem	NOUN
fumecheng-13732	244	25	structure	structure	NOUN
fumecheng-13732	244	26	—	—	PUNCT
fumecheng-13732	244	27	successfully	successfully	ADV
fumecheng-13732	244	28	counteract	counteract	VERB
fumecheng-13732	244	29	the	the	DET
fumecheng-13732	244	30	electrostatic	electrostatic	ADJ
fumecheng-13732	244	31	attraction	attraction	NOUN
fumecheng-13732	244	32	between	between	ADP
fumecheng-13732	244	33	electrodes	electrode	NOUN
fumecheng-13732	244	34	,	,	PUNCT
fumecheng-13732	244	35	limiting	limit	VERB
fumecheng-13732	244	36	w	w	ADP
fumecheng-13732	244	37	to	to	ADP
fumecheng-13732	244	38	periodic	periodic	ADJ
fumecheng-13732	244	39	oscillations	oscillation	NOUN
fumecheng-13732	244	40	.	.	PUNCT
fumecheng-13732	245	1	however	however	ADV
fumecheng-13732	245	2	,	,	PUNCT
fumecheng-13732	245	3	as	as	SCONJ
fumecheng-13732	245	4	m	m	PROPN
fumecheng-13732	245	5	surpasses	surpass	VERB
fumecheng-13732	245	6	m	m	PRON
fumecheng-13732	245	7	*	*	NOUN
fumecheng-13732	245	8	,	,	PUNCT
fumecheng-13732	245	9	the	the	DET
fumecheng-13732	245	10	electrostatic	electrostatic	ADJ
fumecheng-13732	245	11	force	force	NOUN
fumecheng-13732	245	12	undergoes	undergo	VERB
fumecheng-13732	245	13	a	a	DET
fumecheng-13732	245	14	rapid	rapid	ADJ
fumecheng-13732	245	15	amplification	amplification	NOUN
fumecheng-13732	245	16	.	.	PUNCT
fumecheng-13732	246	1	this	this	DET
fumecheng-13732	246	2	force	force	NOUN
fumecheng-13732	246	3	exceeds	exceed	VERB
fumecheng-13732	246	4	the	the	DET
fumecheng-13732	246	5	mechanical	mechanical	ADJ
fumecheng-13732	246	6	restoring	restore	VERB
fumecheng-13732	246	7	capacity	capacity	NOUN
fumecheng-13732	246	8	of	of	ADP
fumecheng-13732	246	9	the	the	DET
fumecheng-13732	246	10	system	system	NOUN
fumecheng-13732	246	11	,	,	PUNCT
fumecheng-13732	246	12	which	which	PRON
fumecheng-13732	246	13	weakens	weaken	VERB
fumecheng-13732	246	14	as	as	ADP
fumecheng-13732	246	15	the	the	DET
fumecheng-13732	246	16	gap	gap	NOUN
fumecheng-13732	246	17	between	between	ADP
fumecheng-13732	246	18	electrodes	electrode	NOUN
fumecheng-13732	246	19	narrows	narrow	VERB
fumecheng-13732	246	20	,	,	PUNCT
fumecheng-13732	246	21	as	as	ADP
fumecheng-13732	246	22	a	a	DET
fumecheng-13732	246	23	result	result	NOUN
fumecheng-13732	246	24	,	,	PUNCT
fumecheng-13732	246	25	the	the	DET
fumecheng-13732	246	26	electrodes	electrode	NOUN
fumecheng-13732	246	27	make	make	VERB
fumecheng-13732	246	28	contact	contact	NOUN
fumecheng-13732	246	29	,	,	PUNCT
fumecheng-13732	246	30	rendering	render	VERB
fumecheng-13732	246	31	the	the	DET
fumecheng-13732	246	32	device	device	NOUN
fumecheng-13732	246	33	inoperable	inoperable	ADJ
fumecheng-13732	246	34	.	.	PUNCT
fumecheng-13732	247	1	658	658	NUM
fumecheng-13732	247	2	j.h	j.h	NOUN
fumecheng-13732	247	3	.	.	PUNCT
fumecheng-13732	248	1	he	he	PRON
fumecheng-13732	248	2	,	,	PUNCT
fumecheng-13732	248	3	j.	j.	PROPN
fumecheng-13732	248	4	ma	ma	PROPN
fumecheng-13732	248	5	,	,	PUNCT
fumecheng-13732	248	6	a.a	a.a	PROPN
fumecheng-13732	248	7	.	.	PROPN
fumecheng-13732	248	8	alsolam	alsolam	PROPN
fumecheng-13732	248	9	,	,	PUNCT
fumecheng-13732	248	10	c.h	c.h	PROPN
fumecheng-13732	248	11	.	.	PUNCT
fumecheng-13732	249	1	he	he	PRON
fumecheng-13732	249	2	fig	fig	VERB
fumecheng-13732	249	3	.	.	PUNCT
fumecheng-13732	250	1	3	3	NUM
fumecheng-13732	250	2	pull	pull	NOUN
fumecheng-13732	250	3	-	-	PUNCT
fumecheng-13732	250	4	in	in	ADP
fumecheng-13732	250	5	motion	motion	NOUN
fumecheng-13732	250	6	for	for	ADP
fumecheng-13732	250	7	m	m	PROPN
fumecheng-13732	250	8	>	>	X
fumecheng-13732	250	9	m	m	VERB
fumecheng-13732	250	10	*	*	PUNCT
fumecheng-13732	250	11	notably	notably	ADV
fumecheng-13732	250	12	,	,	PUNCT
fumecheng-13732	250	13	fig	fig	NOUN
fumecheng-13732	250	14	.	.	PUNCT
fumecheng-13732	251	1	3	3	NUM
fumecheng-13732	251	2	illustrates	illustrate	VERB
fumecheng-13732	251	3	that	that	SCONJ
fumecheng-13732	251	4	the	the	DET
fumecheng-13732	251	5	steepness	steepness	NOUN
fumecheng-13732	251	6	of	of	ADP
fumecheng-13732	251	7	the	the	DET
fumecheng-13732	251	8	pull	pull	VERB
fumecheng-13732	251	9	-	-	PUNCT
fumecheng-13732	251	10	in	in	ADP
fumecheng-13732	251	11	curve	curve	NOUN
fumecheng-13732	251	12	intensifies	intensifie	NOUN
fumecheng-13732	251	13	with	with	ADP
fumecheng-13732	251	14	increasing	increase	VERB
fumecheng-13732	251	15	m	m	VERB
fumecheng-13732	251	16	beyond	beyond	ADP
fumecheng-13732	251	17	m	m	NOUN
fumecheng-13732	251	18	*	*	NOUN
fumecheng-13732	251	19	.	.	PUNCT
fumecheng-13732	252	1	this	this	DET
fumecheng-13732	252	2	phenomenon	phenomenon	NOUN
fumecheng-13732	252	3	arises	arise	VERB
fumecheng-13732	252	4	because	because	SCONJ
fumecheng-13732	252	5	a	a	DET
fumecheng-13732	252	6	higher	high	ADJ
fumecheng-13732	252	7	m	m	NOUN
fumecheng-13732	252	8	corresponds	correspond	VERB
fumecheng-13732	252	9	to	to	ADP
fumecheng-13732	252	10	a	a	DET
fumecheng-13732	252	11	stronger	strong	ADJ
fumecheng-13732	252	12	initial	initial	ADJ
fumecheng-13732	252	13	electrostatic	electrostatic	ADJ
fumecheng-13732	252	14	force	force	NOUN
fumecheng-13732	252	15	,	,	PUNCT
fumecheng-13732	252	16	which	which	PRON
fumecheng-13732	252	17	accelerates	accelerate	VERB
fumecheng-13732	252	18	the	the	DET
fumecheng-13732	252	19	narrowing	narrowing	NOUN
fumecheng-13732	252	20	of	of	ADP
fumecheng-13732	252	21	the	the	DET
fumecheng-13732	252	22	electrode	electrode	NOUN
fumecheng-13732	252	23	gap	gap	NOUN
fumecheng-13732	252	24	.	.	PUNCT
fumecheng-13732	253	1	as	as	SCONJ
fumecheng-13732	253	2	the	the	DET
fumecheng-13732	253	3	gap	gap	NOUN
fumecheng-13732	253	4	shrinks	shrink	VERB
fumecheng-13732	253	5	,	,	PUNCT
fumecheng-13732	253	6	the	the	DET
fumecheng-13732	253	7	electrostatic	electrostatic	ADJ
fumecheng-13732	253	8	force	force	NOUN
fumecheng-13732	253	9	increases	increase	VERB
fumecheng-13732	253	10	further	far	ADV
fumecheng-13732	253	11	,	,	PUNCT
fumecheng-13732	253	12	creating	create	VERB
fumecheng-13732	253	13	a	a	DET
fumecheng-13732	253	14	positive	positive	ADJ
fumecheng-13732	253	15	feedback	feedback	NOUN
fumecheng-13732	253	16	loop	loop	NOUN
fumecheng-13732	253	17	that	that	PRON
fumecheng-13732	253	18	steepens	steepen	VERB
fumecheng-13732	253	19	the	the	DET
fumecheng-13732	253	20	trajectory	trajectory	NOUN
fumecheng-13732	253	21	.	.	PUNCT
fumecheng-13732	254	1	this	this	DET
fumecheng-13732	254	2	behavior	behavior	NOUN
fumecheng-13732	254	3	aligns	align	VERB
fumecheng-13732	254	4	with	with	ADP
fumecheng-13732	254	5	the	the	DET
fumecheng-13732	254	6	predictions	prediction	NOUN
fumecheng-13732	254	7	of	of	ADP
fumecheng-13732	254	8	the	the	DET
fumecheng-13732	254	9	variational	variational	ADJ
fumecheng-13732	254	10	principle	principle	NOUN
fumecheng-13732	254	11	,	,	PUNCT
fumecheng-13732	254	12	which	which	PRON
fumecheng-13732	254	13	emphasizes	emphasize	VERB
fumecheng-13732	254	14	that	that	SCONJ
fumecheng-13732	254	15	beyond	beyond	ADP
fumecheng-13732	254	16	m	m	NOUN
fumecheng-13732	254	17	*	*	NOUN
fumecheng-13732	254	18	,	,	PUNCT
fumecheng-13732	254	19	the	the	DET
fumecheng-13732	254	20	system	system	NOUN
fumecheng-13732	254	21	’s	’s	PART
fumecheng-13732	254	22	energy	energy	NOUN
fumecheng-13732	254	23	balance	balance	NOUN
fumecheng-13732	254	24	(	(	PUNCT
fumecheng-13732	254	25	governed	govern	VERB
fumecheng-13732	254	26	by	by	ADP
fumecheng-13732	254	27	eq	eq	PROPN
fumecheng-13732	254	28	.	.	PUNCT
fumecheng-13732	255	1	(	(	PUNCT
fumecheng-13732	255	2	5	5	X
fumecheng-13732	255	3	)	)	PUNCT
fumecheng-13732	255	4	is	be	AUX
fumecheng-13732	255	5	violated	violate	VERB
fumecheng-13732	255	6	,	,	PUNCT
fumecheng-13732	255	7	with	with	ADP
fumecheng-13732	255	8	the	the	DET
fumecheng-13732	255	9	potential	potential	ADJ
fumecheng-13732	255	10	energy	energy	NOUN
fumecheng-13732	255	11	dominated	dominate	VERB
fumecheng-13732	255	12	by	by	ADP
fumecheng-13732	255	13	electrostatic	electrostatic	ADJ
fumecheng-13732	255	14	contributions	contribution	NOUN
fumecheng-13732	255	15	that	that	PRON
fumecheng-13732	255	16	drive	drive	VERB
fumecheng-13732	255	17	the	the	DET
fumecheng-13732	255	18	irreversible	irreversible	ADJ
fumecheng-13732	255	19	collapse	collapse	NOUN
fumecheng-13732	255	20	.	.	PUNCT
fumecheng-13732	256	1	this	this	DET
fumecheng-13732	256	2	monotonic	monotonic	ADJ
fumecheng-13732	256	3	,	,	PUNCT
fumecheng-13732	256	4	gap	gap	NOUN
fumecheng-13732	256	5	-	-	PUNCT
fumecheng-13732	256	6	closing	closing	NOUN
fumecheng-13732	256	7	motion	motion	NOUN
fumecheng-13732	256	8	captured	capture	VERB
fumecheng-13732	256	9	in	in	ADP
fumecheng-13732	256	10	fig	fig	NOUN
fumecheng-13732	256	11	.	.	PUNCT
fumecheng-13732	257	1	3	3	NUM
fumecheng-13732	257	2	thus	thus	ADV
fumecheng-13732	257	3	serves	serve	VERB
fumecheng-13732	257	4	as	as	ADP
fumecheng-13732	257	5	a	a	DET
fumecheng-13732	257	6	critical	critical	ADJ
fumecheng-13732	257	7	experimental	experimental	ADJ
fumecheng-13732	257	8	validation	validation	NOUN
fumecheng-13732	257	9	of	of	ADP
fumecheng-13732	257	10	the	the	DET
fumecheng-13732	257	11	theoretical	theoretical	ADJ
fumecheng-13732	257	12	pull	pull	NOUN
fumecheng-13732	257	13	-	-	PUNCT
fumecheng-13732	257	14	in	in	ADP
fumecheng-13732	257	15	criterion	criterion	NOUN
fumecheng-13732	257	16	:	:	PUNCT
fumecheng-13732	257	17	the	the	DET
fumecheng-13732	257	18	simultaneous	simultaneous	ADJ
fumecheng-13732	257	19	decay	decay	NOUN
fumecheng-13732	257	20	of	of	ADP
fumecheng-13732	257	21	kinetic	kinetic	ADJ
fumecheng-13732	257	22	energy	energy	NOUN
fumecheng-13732	257	23	and	and	CCONJ
fumecheng-13732	257	24	acceleration	acceleration	NOUN
fumecheng-13732	257	25	at	at	ADP
fumecheng-13732	257	26	w	w	PROPN
fumecheng-13732	257	27	=	=	SYM
fumecheng-13732	257	28	w	w	PROPN
fumecheng-13732	257	29	*	*	NOUN
fumecheng-13732	257	30	marks	mark	VERB
fumecheng-13732	257	31	the	the	DET
fumecheng-13732	257	32	point	point	NOUN
fumecheng-13732	257	33	of	of	ADP
fumecheng-13732	257	34	no	no	DET
fumecheng-13732	257	35	return	return	NOUN
fumecheng-13732	257	36	,	,	PUNCT
fumecheng-13732	257	37	beyond	beyond	ADP
fumecheng-13732	257	38	which	which	PRON
fumecheng-13732	257	39	the	the	DET
fumecheng-13732	257	40	system	system	NOUN
fumecheng-13732	257	41	is	be	AUX
fumecheng-13732	257	42	pulled	pull	VERB
fumecheng-13732	257	43	inexorably	inexorably	ADV
fumecheng-13732	257	44	toward	toward	ADP
fumecheng-13732	257	45	the	the	DET
fumecheng-13732	257	46	singularity	singularity	NOUN
fumecheng-13732	257	47	—	—	PUNCT
fumecheng-13732	257	48	a	a	DET
fumecheng-13732	257	49	hallmark	hallmark	NOUN
fumecheng-13732	257	50	of	of	ADP
fumecheng-13732	257	51	pull	pull	NOUN
fumecheng-13732	257	52	-	-	PUNCT
fumecheng-13732	257	53	in	in	ADP
fumecheng-13732	257	54	instability	instability	NOUN
fumecheng-13732	257	55	in	in	ADP
fumecheng-13732	257	56	electrostatically	electrostatically	ADV
fumecheng-13732	257	57	actuated	actuate	VERB
fumecheng-13732	257	58	mems	mem	NOUN
fumecheng-13732	257	59	devices	device	NOUN
fumecheng-13732	257	60	.	.	PUNCT
fumecheng-13732	258	1	5	5	NUM
fumecheng-13732	258	2	.	.	X
fumecheng-13732	258	3	two	two	NUM
fumecheng-13732	258	4	-	-	PUNCT
fumecheng-13732	258	5	scale	scale	NOUN
fumecheng-13732	258	6	fractal	fractal	ADJ
fumecheng-13732	258	7	derive	derive	NOUN
fumecheng-13732	258	8	based	base	VERB
fumecheng-13732	258	9	fractional	fractional	ADJ
fumecheng-13732	258	10	derivative	derivative	NOUN
fumecheng-13732	258	11	and	and	CCONJ
fumecheng-13732	258	12	its	its	PRON
fumecheng-13732	258	13	application	application	NOUN
fumecheng-13732	258	14	to	to	ADP
fumecheng-13732	258	15	mems	mem	NOUN
fumecheng-13732	258	16	system	system	NOUN
fumecheng-13732	258	17	the	the	DET
fumecheng-13732	258	18	core	core	ADJ
fumecheng-13732	258	19	variational	variational	ADJ
fumecheng-13732	258	20	principle	principle	NOUN
fumecheng-13732	258	21	,	,	PUNCT
fumecheng-13732	258	22	eq	eq	NOUN
fumecheng-13732	258	23	.	.	PUNCT
fumecheng-13732	259	1	(	(	PUNCT
fumecheng-13732	259	2	24	24	NUM
fumecheng-13732	259	3	)	)	PUNCT
fumecheng-13732	259	4	,	,	PUNCT
fumecheng-13732	259	5	is	be	AUX
fumecheng-13732	259	6	derived	derive	VERB
fumecheng-13732	259	7	from	from	ADP
fumecheng-13732	259	8	the	the	DET
fumecheng-13732	259	9	classical	classical	ADJ
fumecheng-13732	259	10	mems	mem	NOUN
fumecheng-13732	259	11	oscillator	oscillator	NOUN
fumecheng-13732	259	12	model	model	NOUN
fumecheng-13732	259	13	,	,	PUNCT
fumecheng-13732	259	14	which	which	PRON
fumecheng-13732	259	15	presupposes	presuppose	VERB
fumecheng-13732	259	16	idealized	idealize	VERB
fumecheng-13732	259	17	,	,	PUNCT
fumecheng-13732	259	18	smooth	smooth	ADJ
fumecheng-13732	259	19	geometries	geometry	NOUN
fumecheng-13732	259	20	.	.	PUNCT
fumecheng-13732	260	1	for	for	ADP
fumecheng-13732	260	2	fractional	fractional	ADJ
fumecheng-13732	260	3	mems	mem	NOUN
fumecheng-13732	260	4	featuring	feature	VERB
fumecheng-13732	260	5	fractal	fractal	ADJ
fumecheng-13732	260	6	structures	structure	NOUN
fumecheng-13732	260	7	(	(	PUNCT
fumecheng-13732	260	8	e.g.	e.g.	ADV
fumecheng-13732	260	9	,	,	PUNCT
fumecheng-13732	260	10	rough	rough	ADJ
fumecheng-13732	260	11	surfaces	surface	NOUN
fumecheng-13732	260	12	or	or	CCONJ
fumecheng-13732	260	13	porous	porous	ADJ
fumecheng-13732	260	14	microstructures	microstructure	NOUN
fumecheng-13732	260	15	)	)	PUNCT
fumecheng-13732	260	16	,	,	PUNCT
fumecheng-13732	260	17	the	the	DET
fumecheng-13732	260	18	electrostaticmechanical	electrostaticmechanical	ADJ
fumecheng-13732	260	19	coupling	coupling	NOUN
fumecheng-13732	260	20	is	be	AUX
fumecheng-13732	260	21	inherently	inherently	ADV
fumecheng-13732	260	22	modulated	modulate	VERB
fumecheng-13732	260	23	by	by	ADP
fumecheng-13732	260	24	multi	multi	ADJ
fumecheng-13732	260	25	-	-	ADJ
fumecheng-13732	260	26	scale	scale	ADJ
fumecheng-13732	260	27	geometric	geometric	ADJ
fumecheng-13732	260	28	irregularities	irregularity	NOUN
fumecheng-13732	260	29	.	.	PUNCT
fumecheng-13732	261	1	to	to	PART
fumecheng-13732	261	2	address	address	VERB
fumecheng-13732	261	3	this	this	DET
fumecheng-13732	261	4	disparity	disparity	NOUN
fumecheng-13732	261	5	,	,	PUNCT
fumecheng-13732	261	6	the	the	DET
fumecheng-13732	261	7	variational	variational	ADJ
fumecheng-13732	261	8	functional	functional	NOUN
fumecheng-13732	261	9	ought	ought	AUX
fumecheng-13732	261	10	to	to	PART
fumecheng-13732	261	11	be	be	AUX
fumecheng-13732	261	12	extended	extend	VERB
fumecheng-13732	261	13	to	to	PART
fumecheng-13732	261	14	incorporate	incorporate	VERB
fumecheng-13732	261	15	fractal	fractal	ADJ
fumecheng-13732	261	16	dimensions	dimension	NOUN
fumecheng-13732	261	17	,	,	PUNCT
fumecheng-13732	261	18	thereby	thereby	ADV
fumecheng-13732	261	19	explicitly	explicitly	ADV
fumecheng-13732	261	20	establishing	establish	VERB
fumecheng-13732	261	21	a	a	DET
fumecheng-13732	261	22	connection	connection	NOUN
fumecheng-13732	261	23	between	between	ADP
fumecheng-13732	261	24	the	the	DET
fumecheng-13732	261	25	semi	semi	ADJ
fumecheng-13732	261	26	-	-	ADJ
fumecheng-13732	261	27	inverse	inverse	ADJ
fumecheng-13732	261	28	method	method	NOUN
fumecheng-13732	261	29	and	and	CCONJ
fumecheng-13732	261	30	fractal	fractal	ADJ
fumecheng-13732	261	31	dynamics	dynamic	NOUN
fumecheng-13732	261	32	.	.	PUNCT
fumecheng-13732	262	1	variational	variational	ADJ
fumecheng-13732	262	2	approach	approach	NOUN
fumecheng-13732	262	3	to	to	ADP
fumecheng-13732	262	4	micro	micro	ADJ
fumecheng-13732	262	5	-	-	ADJ
fumecheng-13732	262	6	electro	electro	ADJ
fumecheng-13732	262	7	-	-	PUNCT
fumecheng-13732	262	8	mechanical	mechanical	ADJ
fumecheng-13732	262	9	systems	system	NOUN
fumecheng-13732	262	10	659	659	NUM
fumecheng-13732	262	11	the	the	DET
fumecheng-13732	262	12	two	two	NUM
fumecheng-13732	262	13	-	-	PUNCT
fumecheng-13732	262	14	scale	scale	NOUN
fumecheng-13732	262	15	fractal	fractal	NOUN
fumecheng-13732	262	16	,	,	PUNCT
fumecheng-13732	262	17	as	as	ADP
fumecheng-13732	262	18	a	a	DET
fumecheng-13732	262	19	geometric	geometric	ADJ
fumecheng-13732	262	20	concept	concept	NOUN
fumecheng-13732	262	21	,	,	PUNCT
fumecheng-13732	262	22	is	be	AUX
fumecheng-13732	262	23	tailored	tailor	VERB
fumecheng-13732	262	24	to	to	PART
fumecheng-13732	262	25	describe	describe	VERB
fumecheng-13732	262	26	porous	porous	ADJ
fumecheng-13732	262	27	media	medium	NOUN
fumecheng-13732	262	28	or	or	CCONJ
fumecheng-13732	262	29	unsmooth	unsmooth	ADJ
fumecheng-13732	262	30	boundaries	boundary	NOUN
fumecheng-13732	262	31	characterized	characterize	VERB
fumecheng-13732	262	32	by	by	ADP
fumecheng-13732	262	33	two	two	NUM
fumecheng-13732	262	34	distinct	distinct	ADJ
fumecheng-13732	262	35	scales	scale	NOUN
fumecheng-13732	262	36	[	[	X
fumecheng-13732	262	37	33	33	NUM
fumecheng-13732	262	38	]	]	PUNCT
fumecheng-13732	262	39	.	.	PUNCT
fumecheng-13732	263	1	within	within	ADP
fumecheng-13732	263	2	the	the	DET
fumecheng-13732	263	3	domain	domain	NOUN
fumecheng-13732	263	4	of	of	ADP
fumecheng-13732	263	5	fractal	fractal	ADJ
fumecheng-13732	263	6	mems	mem	NOUN
fumecheng-13732	263	7	systems	system	NOUN
fumecheng-13732	263	8	,	,	PUNCT
fumecheng-13732	263	9	the	the	DET
fumecheng-13732	263	10	two	two	NUM
fumecheng-13732	263	11	-	-	PUNCT
fumecheng-13732	263	12	scale	scale	NOUN
fumecheng-13732	263	13	fractal	fractal	ADJ
fumecheng-13732	263	14	concept	concept	NOUN
fumecheng-13732	263	15	finds	find	VERB
fumecheng-13732	263	16	several	several	ADJ
fumecheng-13732	263	17	pivotal	pivotal	ADJ
fumecheng-13732	263	18	applications	application	NOUN
fumecheng-13732	263	19	:	:	PUNCT
fumecheng-13732	263	20	1	1	X
fumecheng-13732	263	21	)	)	PUNCT
fumecheng-13732	263	22	modeling	model	VERB
fumecheng-13732	263	23	complex	complex	ADJ
fumecheng-13732	263	24	geometries	geometry	NOUN
fumecheng-13732	263	25	:	:	PUNCT
fumecheng-13732	263	26	fractal	fractal	ADJ
fumecheng-13732	263	27	mems	mem	NOUN
fumecheng-13732	263	28	devices	device	NOUN
fumecheng-13732	263	29	often	often	ADV
fumecheng-13732	263	30	have	have	VERB
fumecheng-13732	263	31	complex	complex	ADJ
fumecheng-13732	263	32	geometries	geometry	NOUN
fumecheng-13732	263	33	that	that	PRON
fumecheng-13732	263	34	can	can	AUX
fumecheng-13732	263	35	not	not	PART
fumecheng-13732	263	36	be	be	AUX
fumecheng-13732	263	37	accurately	accurately	ADV
fumecheng-13732	263	38	described	describe	VERB
fumecheng-13732	263	39	by	by	ADP
fumecheng-13732	263	40	traditional	traditional	ADJ
fumecheng-13732	263	41	geometric	geometric	ADJ
fumecheng-13732	263	42	models	model	NOUN
fumecheng-13732	263	43	.	.	PUNCT
fumecheng-13732	264	1	the	the	DET
fumecheng-13732	264	2	twoscale	twoscale	NOUN
fumecheng-13732	264	3	fractal	fractal	ADJ
fumecheng-13732	264	4	geometry	geometry	NOUN
fumecheng-13732	264	5	provides	provide	VERB
fumecheng-13732	264	6	a	a	DET
fumecheng-13732	264	7	more	more	ADV
fumecheng-13732	264	8	realistic	realistic	ADJ
fumecheng-13732	264	9	representation	representation	NOUN
fumecheng-13732	264	10	of	of	ADP
fumecheng-13732	264	11	these	these	DET
fumecheng-13732	264	12	structures	structure	NOUN
fumecheng-13732	264	13	.	.	PUNCT
fumecheng-13732	265	1	for	for	ADP
fumecheng-13732	265	2	example	example	NOUN
fumecheng-13732	265	3	,	,	PUNCT
fumecheng-13732	265	4	the	the	DET
fumecheng-13732	265	5	surface	surface	NOUN
fumecheng-13732	265	6	of	of	ADP
fumecheng-13732	265	7	a	a	DET
fumecheng-13732	265	8	fractal	fractal	ADJ
fumecheng-13732	265	9	mems	mem	NOUN
fumecheng-13732	265	10	device	device	NOUN
fumecheng-13732	265	11	may	may	AUX
fumecheng-13732	265	12	have	have	VERB
fumecheng-13732	265	13	irregularities	irregularity	NOUN
fumecheng-13732	265	14	and	and	CCONJ
fumecheng-13732	265	15	self	self	NOUN
fumecheng-13732	265	16	similar	similar	ADJ
fumecheng-13732	265	17	patterns	pattern	NOUN
fumecheng-13732	265	18	at	at	ADP
fumecheng-13732	265	19	different	different	ADJ
fumecheng-13732	265	20	scales	scale	NOUN
fumecheng-13732	265	21	,	,	PUNCT
fumecheng-13732	265	22	which	which	PRON
fumecheng-13732	265	23	can	can	AUX
fumecheng-13732	265	24	be	be	AUX
fumecheng-13732	265	25	modeled	model	VERB
fumecheng-13732	265	26	using	use	VERB
fumecheng-13732	265	27	two	two	NUM
fumecheng-13732	265	28	-	-	PUNCT
fumecheng-13732	265	29	scale	scale	NOUN
fumecheng-13732	265	30	fractals	fractal	NOUN
fumecheng-13732	265	31	.	.	PUNCT
fumecheng-13732	266	1	this	this	PRON
fumecheng-13732	266	2	allows	allow	VERB
fumecheng-13732	266	3	for	for	ADP
fumecheng-13732	266	4	a	a	DET
fumecheng-13732	266	5	better	well	ADJ
fumecheng-13732	266	6	understanding	understanding	NOUN
fumecheng-13732	266	7	of	of	ADP
fumecheng-13732	266	8	how	how	SCONJ
fumecheng-13732	266	9	the	the	DET
fumecheng-13732	266	10	geometry	geometry	NOUN
fumecheng-13732	266	11	affects	affect	VERB
fumecheng-13732	266	12	the	the	DET
fumecheng-13732	266	13	device	device	NOUN
fumecheng-13732	266	14	's	's	PART
fumecheng-13732	266	15	physical	physical	ADJ
fumecheng-13732	266	16	properties	property	NOUN
fumecheng-13732	266	17	such	such	ADJ
fumecheng-13732	266	18	as	as	ADP
fumecheng-13732	266	19	capacitance	capacitance	NOUN
fumecheng-13732	266	20	,	,	PUNCT
fumecheng-13732	266	21	stiffness	stiffness	NOUN
fumecheng-13732	266	22	,	,	PUNCT
fumecheng-13732	266	23	and	and	CCONJ
fumecheng-13732	266	24	thermal	thermal	ADJ
fumecheng-13732	266	25	conductivity	conductivity	NOUN
fumecheng-13732	266	26	.	.	PUNCT
fumecheng-13732	267	1	2	2	X
fumecheng-13732	267	2	)	)	PUNCT
fumecheng-13732	267	3	understanding	understand	VERB
fumecheng-13732	267	4	physical	physical	ADJ
fumecheng-13732	267	5	processes	process	NOUN
fumecheng-13732	267	6	:	:	PUNCT
fumecheng-13732	267	7	the	the	DET
fumecheng-13732	267	8	two	two	NUM
fumecheng-13732	267	9	-	-	PUNCT
fumecheng-13732	267	10	scale	scale	NOUN
fumecheng-13732	267	11	fractal	fractal	ADJ
fumecheng-13732	267	12	derivative	derivative	NOUN
fumecheng-13732	267	13	helps	help	NOUN
fumecheng-13732	267	14	in	in	ADP
fumecheng-13732	267	15	understanding	understand	VERB
fumecheng-13732	267	16	the	the	DET
fumecheng-13732	267	17	physical	physical	ADJ
fumecheng-13732	267	18	processes	process	NOUN
fumecheng-13732	267	19	that	that	PRON
fumecheng-13732	267	20	occur	occur	VERB
fumecheng-13732	267	21	within	within	ADP
fumecheng-13732	267	22	fractal	fractal	ADJ
fumecheng-13732	267	23	mems	mem	NOUN
fumecheng-13732	267	24	devices	device	NOUN
fumecheng-13732	267	25	.	.	PUNCT
fumecheng-13732	268	1	it	it	PRON
fumecheng-13732	268	2	can	can	AUX
fumecheng-13732	268	3	be	be	AUX
fumecheng-13732	268	4	used	use	VERB
fumecheng-13732	268	5	to	to	PART
fumecheng-13732	268	6	analyze	analyze	VERB
fumecheng-13732	268	7	how	how	SCONJ
fumecheng-13732	268	8	mechanical	mechanical	ADJ
fumecheng-13732	268	9	and	and	CCONJ
fumecheng-13732	268	10	electrical	electrical	ADJ
fumecheng-13732	268	11	properties	property	NOUN
fumecheng-13732	268	12	change	change	VERB
fumecheng-13732	268	13	with	with	ADP
fumecheng-13732	268	14	respect	respect	NOUN
fumecheng-13732	268	15	to	to	ADP
fumecheng-13732	268	16	the	the	DET
fumecheng-13732	268	17	fractal	fractal	ADJ
fumecheng-13732	268	18	geometry	geometry	NOUN
fumecheng-13732	268	19	.	.	PUNCT
fumecheng-13732	269	1	for	for	ADP
fumecheng-13732	269	2	instance	instance	NOUN
fumecheng-13732	269	3	,	,	PUNCT
fumecheng-13732	269	4	in	in	ADP
fumecheng-13732	269	5	the	the	DET
fumecheng-13732	269	6	study	study	NOUN
fumecheng-13732	269	7	of	of	ADP
fumecheng-13732	269	8	pull	pull	VERB
fumecheng-13732	269	9	in	in	ADP
fumecheng-13732	269	10	instability	instability	NOUN
fumecheng-13732	269	11	in	in	ADP
fumecheng-13732	269	12	mems	mem	NOUN
fumecheng-13732	269	13	,	,	PUNCT
fumecheng-13732	269	14	the	the	DET
fumecheng-13732	269	15	two	two	NUM
fumecheng-13732	269	16	-	-	PUNCT
fumecheng-13732	269	17	scale	scale	NOUN
fumecheng-13732	269	18	fractal	fractal	ADJ
fumecheng-13732	269	19	derivative	derivative	NOUN
fumecheng-13732	269	20	can	can	AUX
fumecheng-13732	269	21	provide	provide	VERB
fumecheng-13732	269	22	a	a	DET
fumecheng-13732	269	23	more	more	ADV
fumecheng-13732	269	24	detailed	detailed	ADJ
fumecheng-13732	269	25	analysis	analysis	NOUN
fumecheng-13732	269	26	of	of	ADP
fumecheng-13732	269	27	how	how	SCONJ
fumecheng-13732	269	28	the	the	DET
fumecheng-13732	269	29	instability	instability	NOUN
fumecheng-13732	269	30	is	be	AUX
fumecheng-13732	269	31	affected	affect	VERB
fumecheng-13732	269	32	by	by	ADP
fumecheng-13732	269	33	the	the	DET
fumecheng-13732	269	34	fractal	fractal	ADJ
fumecheng-13732	269	35	structure	structure	NOUN
fumecheng-13732	269	36	of	of	ADP
fumecheng-13732	269	37	the	the	DET
fumecheng-13732	269	38	device	device	NOUN
fumecheng-13732	269	39	.	.	PUNCT
fumecheng-13732	270	1	this	this	PRON
fumecheng-13732	270	2	can	can	AUX
fumecheng-13732	270	3	lead	lead	VERB
fumecheng-13732	270	4	to	to	ADP
fumecheng-13732	270	5	better	well	ADJ
fumecheng-13732	270	6	design	design	NOUN
fumecheng-13732	270	7	and	and	CCONJ
fumecheng-13732	270	8	optimization	optimization	NOUN
fumecheng-13732	270	9	of	of	ADP
fumecheng-13732	270	10	mems	mem	NOUN
fumecheng-13732	270	11	devices	device	NOUN
fumecheng-13732	270	12	to	to	PART
fumecheng-13732	270	13	avoid	avoid	VERB
fumecheng-13732	270	14	or	or	CCONJ
fumecheng-13732	270	15	control	control	VERB
fumecheng-13732	270	16	the	the	DET
fumecheng-13732	270	17	pull	pull	NOUN
fumecheng-13732	270	18	in	in	ADP
fumecheng-13732	270	19	instability	instability	NOUN
fumecheng-13732	270	20	.	.	PUNCT
fumecheng-13732	271	1	3	3	X
fumecheng-13732	271	2	)	)	PUNCT
fumecheng-13732	271	3	novel	novel	ADJ
fumecheng-13732	271	4	device	device	NOUN
fumecheng-13732	271	5	design	design	NOUN
fumecheng-13732	271	6	:	:	PUNCT
fumecheng-13732	271	7	the	the	DET
fumecheng-13732	271	8	concept	concept	NOUN
fumecheng-13732	271	9	of	of	ADP
fumecheng-13732	271	10	two	two	NUM
fumecheng-13732	271	11	-	-	PUNCT
fumecheng-13732	271	12	scale	scale	NOUN
fumecheng-13732	271	13	fractal	fractal	NOUN
fumecheng-13732	271	14	can	can	AUX
fumecheng-13732	271	15	inspire	inspire	VERB
fumecheng-13732	271	16	novel	novel	ADJ
fumecheng-13732	271	17	designs	design	NOUN
fumecheng-13732	271	18	for	for	ADP
fumecheng-13732	271	19	mems	mem	NOUN
fumecheng-13732	271	20	devices	device	NOUN
fumecheng-13732	271	21	.	.	PUNCT
fumecheng-13732	272	1	by	by	ADP
fumecheng-13732	272	2	incorporating	incorporate	VERB
fumecheng-13732	272	3	two	two	NUM
fumecheng-13732	272	4	-	-	PUNCT
fumecheng-13732	272	5	scale	scale	NOUN
fumecheng-13732	272	6	fractal	fractal	ADJ
fumecheng-13732	272	7	geometries	geometry	NOUN
fumecheng-13732	272	8	,	,	PUNCT
fumecheng-13732	272	9	it	it	PRON
fumecheng-13732	272	10	may	may	AUX
fumecheng-13732	272	11	be	be	AUX
fumecheng-13732	272	12	possible	possible	ADJ
fumecheng-13732	272	13	to	to	PART
fumecheng-13732	272	14	achieve	achieve	VERB
fumecheng-13732	272	15	enhanced	enhanced	ADJ
fumecheng-13732	272	16	performance	performance	NOUN
fumecheng-13732	272	17	in	in	ADP
fumecheng-13732	272	18	terms	term	NOUN
fumecheng-13732	272	19	of	of	ADP
fumecheng-13732	272	20	sensitivity	sensitivity	NOUN
fumecheng-13732	272	21	,	,	PUNCT
fumecheng-13732	272	22	selectivity	selectivity	NOUN
fumecheng-13732	272	23	,	,	PUNCT
fumecheng-13732	272	24	or	or	CCONJ
fumecheng-13732	272	25	power	power	NOUN
fumecheng-13732	272	26	consumption	consumption	NOUN
fumecheng-13732	272	27	.	.	PUNCT
fumecheng-13732	273	1	for	for	ADP
fumecheng-13732	273	2	example	example	NOUN
fumecheng-13732	273	3	,	,	PUNCT
fumecheng-13732	273	4	a	a	DET
fumecheng-13732	273	5	fractal	fractal	ADJ
fumecheng-13732	273	6	mems	mem	NOUN
fumecheng-13732	273	7	sensor	sensor	NOUN
fumecheng-13732	273	8	with	with	ADP
fumecheng-13732	273	9	a	a	DET
fumecheng-13732	273	10	two	two	NUM
fumecheng-13732	273	11	-	-	PUNCT
fumecheng-13732	273	12	scale	scale	NOUN
fumecheng-13732	273	13	fractal	fractal	ADJ
fumecheng-13732	273	14	structure	structure	NOUN
fumecheng-13732	273	15	may	may	AUX
fumecheng-13732	273	16	have	have	VERB
fumecheng-13732	273	17	a	a	DET
fumecheng-13732	273	18	higher	high	ADJ
fumecheng-13732	273	19	sensitivity	sensitivity	NOUN
fumecheng-13732	273	20	to	to	ADP
fumecheng-13732	273	21	certain	certain	ADJ
fumecheng-13732	273	22	physical	physical	ADJ
fumecheng-13732	273	23	quantities	quantity	NOUN
fumecheng-13732	273	24	compared	compare	VERB
fumecheng-13732	273	25	to	to	ADP
fumecheng-13732	273	26	a	a	DET
fumecheng-13732	273	27	traditional	traditional	ADJ
fumecheng-13732	273	28	mems	mem	NOUN
fumecheng-13732	273	29	sensor	sensor	NOUN
fumecheng-13732	273	30	.	.	PUNCT
fumecheng-13732	274	1	this	this	PRON
fumecheng-13732	274	2	can	can	AUX
fumecheng-13732	274	3	open	open	VERB
fumecheng-13732	274	4	up	up	ADP
fumecheng-13732	274	5	new	new	ADJ
fumecheng-13732	274	6	avenues	avenue	NOUN
fumecheng-13732	274	7	for	for	ADP
fumecheng-13732	274	8	the	the	DET
fumecheng-13732	274	9	development	development	NOUN
fumecheng-13732	274	10	of	of	ADP
fumecheng-13732	274	11	advanced	advanced	ADJ
fumecheng-13732	274	12	mems	mem	NOUN
fumecheng-13732	274	13	devices	device	NOUN
fumecheng-13732	274	14	for	for	ADP
fumecheng-13732	274	15	various	various	ADJ
fumecheng-13732	274	16	applications	application	NOUN
fumecheng-13732	274	17	such	such	ADJ
fumecheng-13732	274	18	as	as	ADP
fumecheng-13732	274	19	sensing	sense	VERB
fumecheng-13732	274	20	,	,	PUNCT
fumecheng-13732	274	21	actuation	actuation	NOUN
fumecheng-13732	274	22	,	,	PUNCT
fumecheng-13732	274	23	and	and	CCONJ
fumecheng-13732	274	24	signal	signal	NOUN
fumecheng-13732	274	25	processing	processing	NOUN
fumecheng-13732	274	26	.	.	PUNCT
fumecheng-13732	275	1	the	the	DET
fumecheng-13732	275	2	study	study	NOUN
fumecheng-13732	275	3	of	of	ADP
fumecheng-13732	275	4	mems	mem	NOUN
fumecheng-13732	275	5	oscillators	oscillator	NOUN
fumecheng-13732	275	6	often	often	ADV
fumecheng-13732	275	7	requires	require	VERB
fumecheng-13732	275	8	a	a	DET
fumecheng-13732	275	9	comprehensive	comprehensive	ADJ
fumecheng-13732	275	10	understanding	understanding	NOUN
fumecheng-13732	275	11	of	of	ADP
fumecheng-13732	275	12	their	their	PRON
fumecheng-13732	275	13	behavior	behavior	NOUN
fumecheng-13732	275	14	under	under	ADP
fumecheng-13732	275	15	different	different	ADJ
fumecheng-13732	275	16	geometric	geometric	ADJ
fumecheng-13732	275	17	and	and	CCONJ
fumecheng-13732	275	18	physical	physical	ADJ
fumecheng-13732	275	19	conditions	condition	NOUN
fumecheng-13732	275	20	.	.	PUNCT
fumecheng-13732	276	1	in	in	ADP
fumecheng-13732	276	2	this	this	DET
fumecheng-13732	276	3	regard	regard	NOUN
fumecheng-13732	276	4	,	,	PUNCT
fumecheng-13732	276	5	the	the	DET
fumecheng-13732	276	6	generalization	generalization	NOUN
fumecheng-13732	276	7	of	of	ADP
fumecheng-13732	276	8	the	the	DET
fumecheng-13732	276	9	governing	govern	VERB
fumecheng-13732	276	10	equations	equation	NOUN
fumecheng-13732	276	11	to	to	PART
fumecheng-13732	276	12	account	account	VERB
fumecheng-13732	276	13	for	for	ADP
fumecheng-13732	276	14	more	more	ADJ
fumecheng-13732	276	15	complex	complex	ADJ
fumecheng-13732	276	16	geometries	geometry	NOUN
fumecheng-13732	276	17	,	,	PUNCT
fumecheng-13732	276	18	such	such	ADJ
fumecheng-13732	276	19	as	as	ADP
fumecheng-13732	276	20	the	the	DET
fumecheng-13732	276	21	two	two	NUM
fumecheng-13732	276	22	-	-	PUNCT
fumecheng-13732	276	23	scale	scale	NOUN
fumecheng-13732	276	24	fractal	fractal	NOUN
fumecheng-13732	276	25	,	,	PUNCT
fumecheng-13732	276	26	is	be	AUX
fumecheng-13732	276	27	of	of	ADP
fumecheng-13732	276	28	great	great	ADJ
fumecheng-13732	276	29	importance	importance	NOUN
fumecheng-13732	276	30	.	.	PUNCT
fumecheng-13732	277	1	this	this	DET
fumecheng-13732	277	2	section	section	NOUN
fumecheng-13732	277	3	focuses	focus	VERB
fumecheng-13732	277	4	on	on	ADP
fumecheng-13732	277	5	detailing	detail	VERB
fumecheng-13732	277	6	how	how	SCONJ
fumecheng-13732	277	7	the	the	DET
fumecheng-13732	277	8	eq	eq	NOUN
fumecheng-13732	277	9	.	.	PUNCT
fumecheng-13732	278	1	(	(	PUNCT
fumecheng-13732	278	2	1	1	NUM
fumecheng-13732	278	3	)	)	PUNCT
fumecheng-13732	278	4	for	for	ADP
fumecheng-13732	278	5	the	the	DET
fumecheng-13732	278	6	mems	mem	NOUN
fumecheng-13732	278	7	oscillator	oscillator	NOUN
fumecheng-13732	278	8	can	can	AUX
fumecheng-13732	278	9	be	be	AUX
fumecheng-13732	278	10	extended	extend	VERB
fumecheng-13732	278	11	to	to	PART
fumecheng-13732	278	12	incorporate	incorporate	VERB
fumecheng-13732	278	13	the	the	DET
fumecheng-13732	278	14	two	two	NUM
fumecheng-13732	278	15	-	-	PUNCT
fumecheng-13732	278	16	scale	scale	NOUN
fumecheng-13732	278	17	fractal	fractal	ADJ
fumecheng-13732	278	18	concept	concept	NOUN
fumecheng-13732	278	19	,	,	PUNCT
fumecheng-13732	278	20	providing	provide	VERB
fumecheng-13732	278	21	a	a	DET
fumecheng-13732	278	22	more	more	ADV
fumecheng-13732	278	23	accurate	accurate	ADJ
fumecheng-13732	278	24	and	and	CCONJ
fumecheng-13732	278	25	detailed	detailed	ADJ
fumecheng-13732	278	26	description	description	NOUN
fumecheng-13732	278	27	of	of	ADP
fumecheng-13732	278	28	the	the	DET
fumecheng-13732	278	29	oscillator	oscillator	NOUN
fumecheng-13732	278	30	's	's	PART
fumecheng-13732	278	31	behavior	behavior	NOUN
fumecheng-13732	278	32	.	.	PUNCT
fumecheng-13732	279	1	fractal	fractal	PROPN
fumecheng-13732	279	2	mems	mems	PROPN
fumecheng-13732	279	3	systems	system	NOUN
fumecheng-13732	279	4	[	[	X
fumecheng-13732	279	5	34	34	NUM
fumecheng-13732	279	6	,	,	PUNCT
fumecheng-13732	279	7	35	35	NUM
fumecheng-13732	279	8	]	]	PUNCT
fumecheng-13732	279	9	hold	hold	VERB
fumecheng-13732	279	10	the	the	DET
fumecheng-13732	279	11	potential	potential	NOUN
fumecheng-13732	279	12	to	to	PART
fumecheng-13732	279	13	be	be	AUX
fumecheng-13732	279	14	a	a	DET
fumecheng-13732	279	15	truly	truly	ADV
fumecheng-13732	279	16	revolutionary	revolutionary	ADJ
fumecheng-13732	279	17	advancement	advancement	NOUN
fumecheng-13732	279	18	in	in	ADP
fumecheng-13732	279	19	the	the	DET
fumecheng-13732	279	20	extensive	extensive	ADJ
fumecheng-13732	279	21	and	and	CCONJ
fumecheng-13732	279	22	ever	ever	ADV
fumecheng-13732	279	23	-	-	PUNCT
fumecheng-13732	279	24	evolving	evolve	VERB
fumecheng-13732	279	25	field	field	NOUN
fumecheng-13732	279	26	of	of	ADP
fumecheng-13732	279	27	microelectromechanical	microelectromechanical	ADJ
fumecheng-13732	279	28	systems	system	NOUN
fumecheng-13732	279	29	.	.	PUNCT
fumecheng-13732	280	1	these	these	DET
fumecheng-13732	280	2	remarkable	remarkable	ADJ
fumecheng-13732	280	3	systems	system	NOUN
fumecheng-13732	280	4	draw	draw	VERB
fumecheng-13732	280	5	their	their	PRON
fumecheng-13732	280	6	inspiration	inspiration	NOUN
fumecheng-13732	280	7	from	from	ADP
fumecheng-13732	280	8	the	the	DET
fumecheng-13732	280	9	captivating	captivating	ADJ
fumecheng-13732	280	10	concepts	concept	NOUN
fumecheng-13732	280	11	such	such	ADJ
fumecheng-13732	280	12	as	as	ADP
fumecheng-13732	280	13	the	the	DET
fumecheng-13732	280	14	gecko	gecko	ADJ
fumecheng-13732	280	15	effect	effect	NOUN
fumecheng-13732	280	16	[	[	X
fumecheng-13732	280	17	36	36	NUM
fumecheng-13732	280	18	]	]	PUNCT
fumecheng-13732	280	19	,	,	PUNCT
fumecheng-13732	280	20	with	with	ADP
fumecheng-13732	280	21	its	its	PRON
fumecheng-13732	280	22	astonishing	astonishing	ADJ
fumecheng-13732	280	23	ability	ability	NOUN
fumecheng-13732	280	24	to	to	PART
fumecheng-13732	280	25	allow	allow	VERB
fumecheng-13732	280	26	geckos	geckos	NOUN
fumecheng-13732	280	27	to	to	PART
fumecheng-13732	280	28	adhere	adhere	VERB
fumecheng-13732	280	29	to	to	ADP
fumecheng-13732	280	30	various	various	ADJ
fumecheng-13732	280	31	surfaces	surface	NOUN
fumecheng-13732	280	32	,	,	PUNCT
fumecheng-13732	280	33	and	and	CCONJ
fumecheng-13732	280	34	the	the	DET
fumecheng-13732	280	35	lotus	lotus	PROPN
fumecheng-13732	280	36	effect	effect	NOUN
fumecheng-13732	281	1	[	[	X
fumecheng-13732	281	2	37	37	NUM
fumecheng-13732	281	3	]	]	PUNCT
fumecheng-13732	281	4	,	,	PUNCT
fumecheng-13732	281	5	which	which	PRON
fumecheng-13732	281	6	endows	endow	VERB
fumecheng-13732	281	7	lotus	lotus	PROPN
fumecheng-13732	281	8	leaves	leave	VERB
fumecheng-13732	281	9	with	with	ADP
fumecheng-13732	281	10	their	their	PRON
fumecheng-13732	281	11	remarkable	remarkable	ADJ
fumecheng-13732	281	12	self	self	NOUN
fumecheng-13732	281	13	-	-	PUNCT
fumecheng-13732	281	14	cleaning	clean	VERB
fumecheng-13732	281	15	properties	property	NOUN
fumecheng-13732	281	16	.	.	PUNCT
fumecheng-13732	282	1	the	the	DET
fumecheng-13732	282	2	fractal	fractal	ADJ
fumecheng-13732	282	3	surface	surface	NOUN
fumecheng-13732	282	4	at	at	ADP
fumecheng-13732	282	5	the	the	DET
fumecheng-13732	282	6	nano	nano	NOUN
fumecheng-13732	282	7	scale	scale	NOUN
fumecheng-13732	282	8	is	be	AUX
fumecheng-13732	282	9	truly	truly	ADV
fumecheng-13732	282	10	a	a	DET
fumecheng-13732	282	11	wonder	wonder	NOUN
fumecheng-13732	282	12	,	,	PUNCT
fumecheng-13732	282	13	as	as	SCONJ
fumecheng-13732	282	14	it	it	PRON
fumecheng-13732	282	15	possesses	possess	VERB
fumecheng-13732	282	16	an	an	DET
fumecheng-13732	282	17	extremely	extremely	ADV
fumecheng-13732	282	18	high	high	ADJ
fumecheng-13732	282	19	surface	surface	NOUN
fumecheng-13732	282	20	energy	energy	NOUN
fumecheng-13732	282	21	,	,	PUNCT
fumecheng-13732	282	22	known	know	VERB
fumecheng-13732	282	23	as	as	ADP
fumecheng-13732	282	24	geometric	geometric	ADJ
fumecheng-13732	282	25	potential	potential	NOUN
fumecheng-13732	282	26	[	[	X
fumecheng-13732	282	27	38	38	NUM
fumecheng-13732	282	28	,	,	PUNCT
fumecheng-13732	282	29	39	39	NUM
fumecheng-13732	282	30	]	]	PUNCT
fumecheng-13732	282	31	,	,	PUNCT
fumecheng-13732	282	32	which	which	PRON
fumecheng-13732	282	33	is	be	AUX
fumecheng-13732	282	34	widely	widely	ADV
fumecheng-13732	282	35	used	use	VERB
fumecheng-13732	282	36	to	to	PART
fumecheng-13732	282	37	design	design	VERB
fumecheng-13732	282	38	nano	nano	NOUN
fumecheng-13732	282	39	scale	scale	NOUN
fumecheng-13732	282	40	materials	material	NOUN
fumecheng-13732	282	41	,	,	PUNCT
fumecheng-13732	282	42	demonstrating	demonstrate	VERB
fumecheng-13732	282	43	a	a	DET
fumecheng-13732	282	44	creative	creative	ADJ
fumecheng-13732	282	45	and	and	CCONJ
fumecheng-13732	282	46	forward	forward	ADV
fumecheng-13732	282	47	-	-	PUNCT
fumecheng-13732	282	48	thinking	think	VERB
fumecheng-13732	282	49	approach	approach	NOUN
fumecheng-13732	282	50	that	that	PRON
fumecheng-13732	282	51	could	could	AUX
fumecheng-13732	282	52	potentially	potentially	ADV
fumecheng-13732	282	53	reshape	reshape	VERB
fumecheng-13732	282	54	the	the	DET
fumecheng-13732	282	55	landscape	landscape	NOUN
fumecheng-13732	282	56	.	.	PUNCT
fumecheng-13732	283	1	tian	tian	ADJ
fumecheng-13732	283	2	and	and	CCONJ
fumecheng-13732	283	3	her	her	PRON
fumecheng-13732	283	4	colleagues	colleague	NOUN
fumecheng-13732	283	5	,	,	PUNCT
fumecheng-13732	283	6	in	in	ADP
fumecheng-13732	283	7	their	their	PRON
fumecheng-13732	283	8	remarkable	remarkable	ADJ
fumecheng-13732	283	9	research	research	NOUN
fumecheng-13732	283	10	efforts	effort	NOUN
fumecheng-13732	283	11	as	as	SCONJ
fumecheng-13732	283	12	documented	document	VERB
fumecheng-13732	283	13	in	in	ADP
fumecheng-13732	283	14	ref	ref	NOUN
fumecheng-13732	283	15	.	.	PUNCT
fumecheng-13732	284	1	[	[	X
fumecheng-13732	284	2	40	40	NUM
fumecheng-13732	284	3	]	]	PUNCT
fumecheng-13732	284	4	,	,	PUNCT
fumecheng-13732	284	5	put	put	VERB
fumecheng-13732	284	6	forward	forward	ADV
fumecheng-13732	284	7	the	the	DET
fumecheng-13732	284	8	highly	highly	ADV
fumecheng-13732	284	9	innovative	innovative	ADJ
fumecheng-13732	284	10	concept	concept	NOUN
fumecheng-13732	284	11	of	of	ADP
fumecheng-13732	284	12	fractal	fractal	ADJ
fumecheng-13732	284	13	mems	mem	NOUN
fumecheng-13732	284	14	systems	system	NOUN
fumecheng-13732	284	15	.	.	PUNCT
fumecheng-13732	285	1	this	this	DET
fumecheng-13732	285	2	concept	concept	NOUN
fumecheng-13732	285	3	is	be	AUX
fumecheng-13732	285	4	aimed	aim	VERB
fumecheng-13732	285	5	at	at	ADP
fumecheng-13732	285	6	overcoming	overcome	VERB
fumecheng-13732	285	7	the	the	DET
fumecheng-13732	285	8	pull	pull	VERB
fumecheng-13732	285	9	-	-	PUNCT
fumecheng-13732	285	10	in	in	ADP
fumecheng-13732	285	11	instability	instability	NOUN
fumecheng-13732	285	12	that	that	PRON
fumecheng-13732	285	13	often	often	ADV
fumecheng-13732	285	14	plagues	plague	VERB
fumecheng-13732	285	15	such	such	ADJ
fumecheng-13732	285	16	systems	system	NOUN
fumecheng-13732	285	17	.	.	PUNCT
fumecheng-13732	286	1	by	by	ADP
fumecheng-13732	286	2	introducing	introduce	VERB
fumecheng-13732	286	3	this	this	DET
fumecheng-13732	286	4	concept	concept	NOUN
fumecheng-13732	286	5	,	,	PUNCT
fumecheng-13732	286	6	they	they	PRON
fumecheng-13732	286	7	strive	strive	VERB
fumecheng-13732	286	8	to	to	PART
fumecheng-13732	286	9	make	make	VERB
fumecheng-13732	286	10	the	the	DET
fumecheng-13732	286	11	systems	system	NOUN
fumecheng-13732	286	12	significantly	significantly	ADV
fumecheng-13732	286	13	more	more	ADV
fumecheng-13732	286	14	reliable	reliable	ADJ
fumecheng-13732	286	15	.	.	PUNCT
fumecheng-13732	287	1	the	the	DET
fumecheng-13732	287	2	governing	govern	VERB
fumecheng-13732	287	3	equation	equation	NOUN
fumecheng-13732	287	4	becomes	become	VERB
fumecheng-13732	287	5	:	:	PUNCT
fumecheng-13732	288	1	2	2	NUM
fumecheng-13732	288	2	2	2	NUM
fumecheng-13732	288	3	0	0	NUM
fumecheng-13732	288	4	1	1	NUM
fumecheng-13732	288	5	d	d	NOUN
fumecheng-13732	288	6	d	d	PROPN
fumecheng-13732	288	7	d	d	PROPN
fumecheng-13732	288	8	w	w	PROPN
fumecheng-13732	288	9	m	m	PROPN
fumecheng-13732	288	10	w	w	PROPN
fumecheng-13732	288	11	wdt	wdt	NOUN
fumecheng-13732	288	12	+	+	CCONJ
fumecheng-13732	288	13	−	−	PROPN
fumecheng-13732	288	14	=	=	SYM
fumecheng-13732	288	15	−	−	PROPN
fumecheng-13732	288	16	.	.	PUNCT
fumecheng-13732	289	1	(	(	PUNCT
fumecheng-13732	289	2	32	32	NUM
fumecheng-13732	289	3	)	)	PUNCT
fumecheng-13732	289	4	660	660	NUM
fumecheng-13732	289	5	j.h	j.h	NOUN
fumecheng-13732	289	6	.	.	PUNCT
fumecheng-13732	290	1	he	he	PRON
fumecheng-13732	290	2	,	,	PUNCT
fumecheng-13732	290	3	j.	j.	PROPN
fumecheng-13732	290	4	ma	ma	PROPN
fumecheng-13732	290	5	,	,	PUNCT
fumecheng-13732	290	6	a.a	a.a	PROPN
fumecheng-13732	290	7	.	.	PROPN
fumecheng-13732	290	8	alsolam	alsolam	PROPN
fumecheng-13732	290	9	,	,	PUNCT
fumecheng-13732	290	10	c.h	c.h	PROPN
fumecheng-13732	290	11	.	.	PUNCT
fumecheng-13732	291	1	he	he	PRON
fumecheng-13732	291	2	in	in	ADP
fumecheng-13732	291	3	this	this	DET
fumecheng-13732	291	4	equation	equation	NOUN
fumecheng-13732	291	5	,	,	PUNCT
fumecheng-13732	291	6	d	d	PRON
fumecheng-13732	291	7	represents	represent	VERB
fumecheng-13732	291	8	the	the	DET
fumecheng-13732	291	9	two	two	NUM
fumecheng-13732	291	10	-	-	PUNCT
fumecheng-13732	291	11	fractal	fractal	NOUN
fumecheng-13732	291	12	dimensions	dimension	NOUN
fumecheng-13732	291	13	,	,	PUNCT
fumecheng-13732	291	14	which	which	PRON
fumecheng-13732	291	15	are	be	AUX
fumecheng-13732	291	16	essential	essential	ADJ
fumecheng-13732	291	17	in	in	ADP
fumecheng-13732	291	18	defining	define	VERB
fumecheng-13732	291	19	the	the	DET
fumecheng-13732	291	20	fractal	fractal	ADJ
fumecheng-13732	291	21	nature	nature	NOUN
fumecheng-13732	291	22	of	of	ADP
fumecheng-13732	291	23	the	the	DET
fumecheng-13732	291	24	geometry	geometry	NOUN
fumecheng-13732	291	25	.	.	PUNCT
fumecheng-13732	292	1	the	the	DET
fumecheng-13732	292	2	two	two	NUM
fumecheng-13732	292	3	-	-	PUNCT
fumecheng-13732	292	4	scale	scale	NOUN
fumecheng-13732	292	5	fractal	fractal	ADJ
fumecheng-13732	292	6	derivative	derivative	NOUN
fumecheng-13732	292	7	is	be	AUX
fumecheng-13732	292	8	given	give	VERB
fumecheng-13732	292	9	as	as	SCONJ
fumecheng-13732	292	10	follows	follow	VERB
fumecheng-13732	292	11	:	:	PUNCT
fumecheng-13732	292	12	0	0	NUM
fumecheng-13732	292	13	0	0	NUM
fumecheng-13732	292	14	0	0	NUM
fumecheng-13732	292	15	0	0	NUM
fumecheng-13732	292	16	(	(	PUNCT
fumecheng-13732	292	17	,	,	PUNCT
fumecheng-13732	292	18	)	)	PUNCT
fumecheng-13732	292	19	(	(	PUNCT
fumecheng-13732	292	20	,	,	PUNCT
fumecheng-13732	292	21	)	)	PUNCT
fumecheng-13732	292	22	(	(	PUNCT
fumecheng-13732	292	23	)	)	PUNCT
fumecheng-13732	292	24	(	(	PUNCT
fumecheng-13732	292	25	1	1	X
fumecheng-13732	292	26	)	)	PUNCT
fumecheng-13732	292	27	lim	lim	NOUN
fumecheng-13732	292	28	(	(	PUNCT
fumecheng-13732	292	29	)	)	PUNCT
fumecheng-13732	293	1	d	d	X
fumecheng-13732	293	2	d	d	X
fumecheng-13732	293	3	dt	dt	X
fumecheng-13732	294	1	t	t	PROPN
fumecheng-13732	294	2	t	t	PROPN
fumecheng-13732	294	3	w	w	PROPN
fumecheng-13732	294	4	x	x	PROPN
fumecheng-13732	294	5	t	t	PROPN
fumecheng-13732	294	6	w	w	PROPN
fumecheng-13732	294	7	x	x	PROPN
fumecheng-13732	294	8	tw	tw	ADP
fumecheng-13732	294	9	t	t	PROPN
fumecheng-13732	294	10	d	d	NOUN
fumecheng-13732	294	11	t	t	PROPN
fumecheng-13732	294	12	t	t	X
fumecheng-13732	294	13	t−	t−	PROPN
fumecheng-13732	294	14	→	→	SYM
fumecheng-13732	294	15	−	−	PROPN
fumecheng-13732	294	16	=	=	SYM
fumecheng-13732	294	17			VERB
fumecheng-13732	294	18	+	+	NUM
fumecheng-13732	294	19			ADJ
fumecheng-13732	294	20	−	−	NOUN
fumecheng-13732	294	21	.	.	PUNCT
fumecheng-13732	295	1	(	(	PUNCT
fumecheng-13732	295	2	33	33	NUM
fumecheng-13732	295	3	)	)	PUNCT
fumecheng-13732	295	4	this	this	DET
fumecheng-13732	295	5	definition	definition	NOUN
fumecheng-13732	295	6	captures	capture	VERB
fumecheng-13732	295	7	the	the	DET
fumecheng-13732	295	8	essence	essence	NOUN
fumecheng-13732	295	9	of	of	ADP
fumecheng-13732	295	10	the	the	DET
fumecheng-13732	295	11	fractal	fractal	ADJ
fumecheng-13732	295	12	derivative	derivative	NOUN
fumecheng-13732	295	13	by	by	ADP
fumecheng-13732	295	14	considering	consider	VERB
fumecheng-13732	295	15	the	the	DET
fumecheng-13732	295	16	limit	limit	NOUN
fumecheng-13732	295	17	of	of	ADP
fumecheng-13732	295	18	the	the	DET
fumecheng-13732	295	19	difference	difference	NOUN
fumecheng-13732	295	20	quotient	quotient	NOUN
fumecheng-13732	295	21	as	as	ADP
fumecheng-13732	295	22	the	the	DET
fumecheng-13732	295	23	time	time	NOUN
fumecheng-13732	295	24	interval	interval	NOUN
fumecheng-13732	295	25	approaches	approach	NOUN
fumecheng-13732	295	26	zero	zero	NUM
fumecheng-13732	295	27	,	,	PUNCT
fumecheng-13732	295	28	weighted	weight	VERB
fumecheng-13732	295	29	by	by	ADP
fumecheng-13732	295	30	the	the	DET
fumecheng-13732	295	31	gamma	gamma	NOUN
fumecheng-13732	295	32	function	function	NOUN
fumecheng-13732	295	33	of	of	ADP
fumecheng-13732	295	34	the	the	DET
fumecheng-13732	295	35	fractal	fractal	ADJ
fumecheng-13732	295	36	dimension	dimension	NOUN
fumecheng-13732	295	37	.	.	PUNCT
fumecheng-13732	296	1	the	the	DET
fumecheng-13732	296	2	two	two	NUM
fumecheng-13732	296	3	-	-	PUNCT
fumecheng-13732	296	4	scale	scale	NOUN
fumecheng-13732	296	5	fractal	fractal	ADJ
fumecheng-13732	296	6	derivative	derivative	NOUN
fumecheng-13732	296	7	has	have	AUX
fumecheng-13732	296	8	found	find	VERB
fumecheng-13732	296	9	extensive	extensive	ADJ
fumecheng-13732	296	10	application	application	NOUN
fumecheng-13732	296	11	in	in	ADP
fumecheng-13732	296	12	modeling	model	VERB
fumecheng-13732	296	13	complex	complex	ADJ
fumecheng-13732	296	14	problems	problem	NOUN
fumecheng-13732	296	15	.	.	PUNCT
fumecheng-13732	297	1	as	as	SCONJ
fumecheng-13732	297	2	evidenced	evidence	VERB
fumecheng-13732	297	3	by	by	ADP
fumecheng-13732	297	4	numerous	numerous	ADJ
fumecheng-13732	297	5	studies	study	NOUN
fumecheng-13732	297	6	[	[	X
fumecheng-13732	297	7	41	41	NUM
fumecheng-13732	297	8	,	,	PUNCT
fumecheng-13732	297	9	42	42	NUM
fumecheng-13732	297	10	]	]	PUNCT
fumecheng-13732	297	11	,	,	PUNCT
fumecheng-13732	297	12	it	it	PRON
fumecheng-13732	297	13	has	have	AUX
fumecheng-13732	297	14	demonstrated	demonstrate	VERB
fumecheng-13732	297	15	its	its	PRON
fumecheng-13732	297	16	remarkable	remarkable	ADJ
fumecheng-13732	297	17	effectiveness	effectiveness	NOUN
fumecheng-13732	297	18	in	in	ADP
fumecheng-13732	297	19	this	this	DET
fumecheng-13732	297	20	regard	regard	NOUN
fumecheng-13732	297	21	.	.	PUNCT
fumecheng-13732	298	1	this	this	DET
fumecheng-13732	298	2	derivative	derivative	ADJ
fumecheng-13732	298	3	possesses	possess	VERB
fumecheng-13732	298	4	the	the	DET
fumecheng-13732	298	5	following	follow	VERB
fumecheng-13732	298	6	properties	property	NOUN
fumecheng-13732	298	7	:	:	PUNCT
fumecheng-13732	298	8	1	1	NUM
fumecheng-13732	298	9	0	0	NUM
fumecheng-13732	298	10	(	(	PUNCT
fumecheng-13732	298	11	)	)	PUNCT
fumecheng-13732	298	12	(	(	PUNCT
fumecheng-13732	298	13	1	1	NUM
fumecheng-13732	298	14	)	)	PUNCT
fumecheng-13732	298	15	(	(	PUNCT
fumecheng-13732	298	16	)	)	PUNCT
fumecheng-13732	299	1	d	d	X
fumecheng-13732	299	2	d	d	PROPN
fumecheng-13732	299	3	d	d	X
fumecheng-13732	299	4	w	w	PROPN
fumecheng-13732	299	5	w	w	PROPN
fumecheng-13732	299	6	t	t	PROPN
fumecheng-13732	299	7	d	d	PROPN
fumecheng-13732	299	8	t	t	PROPN
fumecheng-13732	299	9	tt	tt	PROPN
fumecheng-13732	299	10	−	−	PROPN
fumecheng-13732	299	11			ADV
fumecheng-13732	299	12			ADV
fumecheng-13732	299	13			VERB
fumecheng-13732	299	14	+	+	NUM
fumecheng-13732	299	15			NOUN
fumecheng-13732	299	16			PROPN
fumecheng-13732	299	17	(	(	PUNCT
fumecheng-13732	299	18	34	34	NUM
fumecheng-13732	299	19	)	)	SYM
fumecheng-13732	299	20	2	2	NUM
fumecheng-13732	299	21	2	2	NUM
fumecheng-13732	299	22	(	(	PUNCT
fumecheng-13732	299	23	)	)	PUNCT
fumecheng-13732	300	1	d	d	PUNCT
fumecheng-13732	300	2	d	d	PUNCT
fumecheng-13732	300	3	d	d	X
fumecheng-13732	300	4	d	d	PROPN
fumecheng-13732	300	5	d	d	PROPN
fumecheng-13732	300	6	d	d	PROPN
fumecheng-13732	300	7	w	w	PROPN
fumecheng-13732	300	8	w	w	PROPN
fumecheng-13732	300	9	t	t	PROPN
fumecheng-13732	300	10	t	t	PROPN
fumecheng-13732	300	11	t	t	PROPN
fumecheng-13732	300	12			ADJ
fumecheng-13732	300	13			ADJ
fumecheng-13732	300	14			PROPN
fumecheng-13732	300	15	=	=	SYM
fumecheng-13732	300	16			ADJ
fumecheng-13732	300	17			ADJ
fumecheng-13732	300	18			PROPN
fumecheng-13732	300	19	(	(	PUNCT
fumecheng-13732	300	20	35	35	NUM
fumecheng-13732	300	21	)	)	PUNCT
fumecheng-13732	300	22	2	2	NUM
fumecheng-13732	300	23	2	2	NUM
fumecheng-13732	300	24	,	,	PUNCT
fumecheng-13732	300	25	0	0	NUM
fumecheng-13732	300	26	,	,	PUNCT
fumecheng-13732	300	27	1	1	NUM
fumecheng-13732	300	28	,	,	PUNCT
fumecheng-13732	300	29	2	2	NUM
fumecheng-13732	300	30	d	d	NOUN
fumecheng-13732	300	31	d	d	PROPN
fumecheng-13732	300	32	w	w	PROPN
fumecheng-13732	300	33	d	d	PROPN
fumecheng-13732	300	34	w	w	PROPN
fumecheng-13732	300	35	w	w	PROPN
fumecheng-13732	300	36	d	d	X
fumecheng-13732	300	37	tt	tt	PROPN
fumecheng-13732	300	38	w	w	PROPN
fumecheng-13732	300	39	d	d	PROPN
fumecheng-13732	300	40	t	t	X
fumecheng-13732	300	41			ADP
fumecheng-13732	300	42			NUM
fumecheng-13732	300	43	=	=	SYM
fumecheng-13732	300	44			NUM
fumecheng-13732	300	45			ADJ
fumecheng-13732	300	46			PROPN
fumecheng-13732	300	47	=	=	PUNCT
fumecheng-13732	300	48	=	=	PROPN
fumecheng-13732	300	49			NUM
fumecheng-13732	300	50			VERB
fumecheng-13732	300	51			NUM
fumecheng-13732	300	52			NOUN
fumecheng-13732	300	53	=	=	NUM
fumecheng-13732	300	54			X
fumecheng-13732	300	55			PROPN
fumecheng-13732	300	56	(	(	PUNCT
fumecheng-13732	300	57	36	36	NUM
fumecheng-13732	300	58	)	)	PUNCT
fumecheng-13732	300	59	the	the	DET
fumecheng-13732	300	60	generalized	generalized	ADJ
fumecheng-13732	300	61	equation	equation	NOUN
fumecheng-13732	300	62	has	have	VERB
fumecheng-13732	300	63	several	several	ADJ
fumecheng-13732	300	64	important	important	ADJ
fumecheng-13732	300	65	implications	implication	NOUN
fumecheng-13732	300	66	for	for	ADP
fumecheng-13732	300	67	the	the	DET
fumecheng-13732	300	68	study	study	NOUN
fumecheng-13732	300	69	of	of	ADP
fumecheng-13732	300	70	mems	mem	NOUN
fumecheng-13732	300	71	oscillators	oscillator	NOUN
fumecheng-13732	300	72	.	.	PUNCT
fumecheng-13732	301	1	firstly	firstly	ADV
fumecheng-13732	301	2	,	,	PUNCT
fumecheng-13732	301	3	it	it	PRON
fumecheng-13732	301	4	provides	provide	VERB
fumecheng-13732	301	5	a	a	DET
fumecheng-13732	301	6	more	more	ADV
fumecheng-13732	301	7	accurate	accurate	ADJ
fumecheng-13732	301	8	model	model	NOUN
fumecheng-13732	301	9	for	for	ADP
fumecheng-13732	301	10	predicting	predict	VERB
fumecheng-13732	301	11	the	the	DET
fumecheng-13732	301	12	behavior	behavior	NOUN
fumecheng-13732	301	13	of	of	ADP
fumecheng-13732	301	14	mems	mem	NOUN
fumecheng-13732	301	15	oscillators	oscillator	NOUN
fumecheng-13732	301	16	with	with	ADP
fumecheng-13732	301	17	fractal	fractal	ADJ
fumecheng-13732	301	18	geometries	geometry	NOUN
fumecheng-13732	301	19	.	.	PUNCT
fumecheng-13732	302	1	this	this	PRON
fumecheng-13732	302	2	is	be	AUX
fumecheng-13732	302	3	particularly	particularly	ADV
fumecheng-13732	302	4	useful	useful	ADJ
fumecheng-13732	302	5	in	in	ADP
fumecheng-13732	302	6	applications	application	NOUN
fumecheng-13732	302	7	where	where	SCONJ
fumecheng-13732	302	8	the	the	DET
fumecheng-13732	302	9	fractal	fractal	ADJ
fumecheng-13732	302	10	nature	nature	NOUN
fumecheng-13732	302	11	of	of	ADP
fumecheng-13732	302	12	the	the	DET
fumecheng-13732	302	13	mems	mem	NOUN
fumecheng-13732	302	14	structure	structure	NOUN
fumecheng-13732	302	15	plays	play	VERB
fumecheng-13732	302	16	a	a	DET
fumecheng-13732	302	17	significant	significant	ADJ
fumecheng-13732	302	18	role	role	NOUN
fumecheng-13732	302	19	.	.	PUNCT
fumecheng-13732	303	1	for	for	ADP
fumecheng-13732	303	2	example	example	NOUN
fumecheng-13732	303	3	,	,	PUNCT
fumecheng-13732	303	4	in	in	ADP
fumecheng-13732	303	5	certain	certain	ADJ
fumecheng-13732	303	6	sensor	sensor	NOUN
fumecheng-13732	303	7	and	and	CCONJ
fumecheng-13732	303	8	actuator	actuator	NOUN
fumecheng-13732	303	9	designs	design	NOUN
fumecheng-13732	303	10	,	,	PUNCT
fumecheng-13732	303	11	the	the	DET
fumecheng-13732	303	12	fractal	fractal	ADJ
fumecheng-13732	303	13	geometry	geometry	NOUN
fumecheng-13732	303	14	can	can	AUX
fumecheng-13732	303	15	enhance	enhance	VERB
fumecheng-13732	303	16	the	the	DET
fumecheng-13732	303	17	sensitivity	sensitivity	NOUN
fumecheng-13732	303	18	and	and	CCONJ
fumecheng-13732	303	19	performance	performance	NOUN
fumecheng-13732	303	20	of	of	ADP
fumecheng-13732	303	21	the	the	DET
fumecheng-13732	303	22	device	device	NOUN
fumecheng-13732	303	23	.	.	PUNCT
fumecheng-13732	304	1	the	the	DET
fumecheng-13732	304	2	generalized	generalized	ADJ
fumecheng-13732	304	3	equation	equation	NOUN
fumecheng-13732	304	4	allows	allow	VERB
fumecheng-13732	304	5	us	we	PRON
fumecheng-13732	304	6	to	to	PART
fumecheng-13732	304	7	analyze	analyze	VERB
fumecheng-13732	304	8	how	how	SCONJ
fumecheng-13732	304	9	the	the	DET
fumecheng-13732	304	10	fractal	fractal	ADJ
fumecheng-13732	304	11	structure	structure	NOUN
fumecheng-13732	304	12	affects	affect	VERB
fumecheng-13732	304	13	the	the	DET
fumecheng-13732	304	14	oscillator	oscillator	NOUN
fumecheng-13732	304	15	's	's	PART
fumecheng-13732	304	16	response	response	NOUN
fumecheng-13732	304	17	to	to	ADP
fumecheng-13732	304	18	different	different	ADJ
fumecheng-13732	304	19	inputs	input	NOUN
fumecheng-13732	304	20	,	,	PUNCT
fumecheng-13732	304	21	such	such	ADJ
fumecheng-13732	304	22	as	as	ADP
fumecheng-13732	304	23	voltage	voltage	NOUN
fumecheng-13732	304	24	changes	change	NOUN
fumecheng-13732	304	25	or	or	CCONJ
fumecheng-13732	304	26	external	external	ADJ
fumecheng-13732	304	27	perturbations	perturbation	NOUN
fumecheng-13732	304	28	.	.	PUNCT
fumecheng-13732	305	1	secondly	secondly	ADV
fumecheng-13732	305	2	,	,	PUNCT
fumecheng-13732	305	3	the	the	DET
fumecheng-13732	305	4	generalized	generalized	ADJ
fumecheng-13732	305	5	equation	equation	NOUN
fumecheng-13732	305	6	allows	allow	VERB
fumecheng-13732	305	7	for	for	ADP
fumecheng-13732	305	8	a	a	DET
fumecheng-13732	305	9	deeper	deep	ADJ
fumecheng-13732	305	10	understanding	understanding	NOUN
fumecheng-13732	305	11	of	of	ADP
fumecheng-13732	305	12	the	the	DET
fumecheng-13732	305	13	physical	physical	ADJ
fumecheng-13732	305	14	processes	process	NOUN
fumecheng-13732	305	15	involved	involve	VERB
fumecheng-13732	305	16	in	in	ADP
fumecheng-13732	305	17	the	the	DET
fumecheng-13732	305	18	operation	operation	NOUN
fumecheng-13732	305	19	of	of	ADP
fumecheng-13732	305	20	mems	mem	NOUN
fumecheng-13732	305	21	oscillators	oscillator	NOUN
fumecheng-13732	305	22	.	.	PUNCT
fumecheng-13732	306	1	by	by	ADP
fumecheng-13732	306	2	considering	consider	VERB
fumecheng-13732	306	3	the	the	DET
fumecheng-13732	306	4	fractal	fractal	ADJ
fumecheng-13732	306	5	geometry	geometry	NOUN
fumecheng-13732	306	6	,	,	PUNCT
fumecheng-13732	306	7	we	we	PRON
fumecheng-13732	306	8	can	can	AUX
fumecheng-13732	306	9	better	well	ADV
fumecheng-13732	306	10	analyze	analyze	VERB
fumecheng-13732	306	11	the	the	DET
fumecheng-13732	306	12	effects	effect	NOUN
fumecheng-13732	306	13	of	of	ADP
fumecheng-13732	306	14	various	various	ADJ
fumecheng-13732	306	15	factors	factor	NOUN
fumecheng-13732	306	16	on	on	ADP
fumecheng-13732	306	17	the	the	DET
fumecheng-13732	306	18	oscillator	oscillator	NOUN
fumecheng-13732	306	19	's	's	PART
fumecheng-13732	306	20	performance	performance	NOUN
fumecheng-13732	306	21	.	.	PUNCT
fumecheng-13732	307	1	for	for	ADP
fumecheng-13732	307	2	instance	instance	NOUN
fumecheng-13732	307	3	,	,	PUNCT
fumecheng-13732	307	4	the	the	DET
fumecheng-13732	307	5	surface	surface	NOUN
fumecheng-13732	307	6	roughness	roughness	NOUN
fumecheng-13732	307	7	of	of	ADP
fumecheng-13732	307	8	the	the	DET
fumecheng-13732	307	9	mems	mem	NOUN
fumecheng-13732	307	10	device	device	NOUN
fumecheng-13732	307	11	,	,	PUNCT
fumecheng-13732	307	12	which	which	PRON
fumecheng-13732	307	13	is	be	AUX
fumecheng-13732	307	14	often	often	ADV
fumecheng-13732	307	15	related	relate	VERB
fumecheng-13732	307	16	to	to	ADP
fumecheng-13732	307	17	its	its	PRON
fumecheng-13732	307	18	fractal	fractal	ADJ
fumecheng-13732	307	19	structure	structure	NOUN
fumecheng-13732	307	20	,	,	PUNCT
fumecheng-13732	307	21	can	can	AUX
fumecheng-13732	307	22	influence	influence	VERB
fumecheng-13732	307	23	the	the	DET
fumecheng-13732	307	24	dissipation	dissipation	NOUN
fumecheng-13732	307	25	of	of	ADP
fumecheng-13732	307	26	energy	energy	NOUN
fumecheng-13732	307	27	and	and	CCONJ
fumecheng-13732	307	28	the	the	DET
fumecheng-13732	307	29	damping	damp	VERB
fumecheng-13732	307	30	characteristics	characteristic	NOUN
fumecheng-13732	307	31	of	of	ADP
fumecheng-13732	307	32	the	the	DET
fumecheng-13732	307	33	oscillator	oscillator	NOUN
fumecheng-13732	307	34	.	.	PUNCT
fumecheng-13732	308	1	additionally	additionally	ADV
fumecheng-13732	308	2	,	,	PUNCT
fumecheng-13732	308	3	the	the	DET
fumecheng-13732	308	4	distribution	distribution	NOUN
fumecheng-13732	308	5	of	of	ADP
fumecheng-13732	308	6	material	material	NOUN
fumecheng-13732	308	7	properties	property	NOUN
fumecheng-13732	308	8	within	within	ADP
fumecheng-13732	308	9	the	the	DET
fumecheng-13732	308	10	fractal	fractal	ADJ
fumecheng-13732	308	11	structure	structure	NOUN
fumecheng-13732	308	12	can	can	AUX
fumecheng-13732	308	13	affect	affect	VERB
fumecheng-13732	308	14	the	the	DET
fumecheng-13732	308	15	mechanical	mechanical	ADJ
fumecheng-13732	308	16	and	and	CCONJ
fumecheng-13732	308	17	electrical	electrical	ADJ
fumecheng-13732	308	18	properties	property	NOUN
fumecheng-13732	308	19	of	of	ADP
fumecheng-13732	308	20	the	the	DET
fumecheng-13732	308	21	oscillator	oscillator	NOUN
fumecheng-13732	308	22	,	,	PUNCT
fumecheng-13732	308	23	such	such	ADJ
fumecheng-13732	308	24	as	as	ADP
fumecheng-13732	308	25	its	its	PRON
fumecheng-13732	308	26	stiffness	stiffness	NOUN
fumecheng-13732	308	27	and	and	CCONJ
fumecheng-13732	308	28	capacitance	capacitance	NOUN
fumecheng-13732	308	29	.	.	PUNCT
fumecheng-13732	309	1	the	the	DET
fumecheng-13732	309	2	generalized	generalized	ADJ
fumecheng-13732	309	3	equation	equation	NOUN
fumecheng-13732	309	4	enables	enable	VERB
fumecheng-13732	309	5	us	we	PRON
fumecheng-13732	309	6	to	to	PART
fumecheng-13732	309	7	study	study	VERB
fumecheng-13732	309	8	these	these	DET
fumecheng-13732	309	9	effects	effect	NOUN
fumecheng-13732	309	10	in	in	ADP
fumecheng-13732	309	11	more	more	ADJ
fumecheng-13732	309	12	detail	detail	NOUN
fumecheng-13732	309	13	,	,	PUNCT
fumecheng-13732	309	14	providing	provide	VERB
fumecheng-13732	309	15	insights	insight	NOUN
fumecheng-13732	309	16	into	into	ADP
fumecheng-13732	309	17	how	how	SCONJ
fumecheng-13732	309	18	to	to	PART
fumecheng-13732	309	19	optimize	optimize	VERB
fumecheng-13732	309	20	the	the	DET
fumecheng-13732	309	21	design	design	NOUN
fumecheng-13732	309	22	and	and	CCONJ
fumecheng-13732	309	23	performance	performance	NOUN
fumecheng-13732	309	24	of	of	ADP
fumecheng-13732	309	25	mems	mem	NOUN
fumecheng-13732	309	26	oscillators	oscillator	NOUN
fumecheng-13732	309	27	.	.	PUNCT
fumecheng-13732	310	1	in	in	ADP
fumecheng-13732	310	2	conclusion	conclusion	NOUN
fumecheng-13732	310	3	,	,	PUNCT
fumecheng-13732	310	4	the	the	DET
fumecheng-13732	310	5	generalization	generalization	NOUN
fumecheng-13732	310	6	of	of	ADP
fumecheng-13732	310	7	eq	eq	PROPN
fumecheng-13732	310	8	.	.	PUNCT
fumecheng-13732	311	1	(	(	PUNCT
fumecheng-13732	311	2	1	1	NUM
fumecheng-13732	311	3	)	)	PUNCT
fumecheng-13732	311	4	for	for	ADP
fumecheng-13732	311	5	the	the	DET
fumecheng-13732	311	6	mems	mem	NOUN
fumecheng-13732	311	7	oscillator	oscillator	NOUN
fumecheng-13732	311	8	to	to	ADP
fumecheng-13732	311	9	the	the	DET
fumecheng-13732	311	10	two	two	NUM
fumecheng-13732	311	11	-	-	PUNCT
fumecheng-13732	311	12	scale	scale	NOUN
fumecheng-13732	311	13	fractal	fractal	ADJ
fumecheng-13732	311	14	case	case	NOUN
fumecheng-13732	311	15	is	be	AUX
fumecheng-13732	311	16	a	a	DET
fumecheng-13732	311	17	significant	significant	ADJ
fumecheng-13732	311	18	step	step	NOUN
fumecheng-13732	311	19	forward	forward	ADV
fumecheng-13732	311	20	in	in	ADP
fumecheng-13732	311	21	understanding	understand	VERB
fumecheng-13732	311	22	the	the	DET
fumecheng-13732	311	23	behavior	behavior	NOUN
fumecheng-13732	311	24	of	of	ADP
fumecheng-13732	311	25	mems	mem	NOUN
fumecheng-13732	311	26	oscillators	oscillator	NOUN
fumecheng-13732	311	27	in	in	ADP
fumecheng-13732	311	28	the	the	DET
fumecheng-13732	311	29	context	context	NOUN
fumecheng-13732	311	30	of	of	ADP
fumecheng-13732	311	31	fractal	fractal	ADJ
fumecheng-13732	311	32	geometry	geometry	NOUN
fumecheng-13732	311	33	.	.	PUNCT
fumecheng-13732	312	1	this	this	DET
fumecheng-13732	312	2	generalization	generalization	NOUN
fumecheng-13732	312	3	not	not	PART
fumecheng-13732	312	4	only	only	ADV
fumecheng-13732	312	5	allows	allow	VERB
fumecheng-13732	312	6	for	for	ADP
fumecheng-13732	312	7	a	a	DET
fumecheng-13732	312	8	more	more	ADV
fumecheng-13732	312	9	accurate	accurate	ADJ
fumecheng-13732	312	10	description	description	NOUN
fumecheng-13732	312	11	of	of	ADP
fumecheng-13732	312	12	the	the	DET
fumecheng-13732	312	13	oscillator	oscillator	NOUN
fumecheng-13732	312	14	's	's	PART
fumecheng-13732	312	15	behavior	behavior	NOUN
fumecheng-13732	312	16	but	but	CCONJ
fumecheng-13732	312	17	also	also	ADV
fumecheng-13732	312	18	provides	provide	VERB
fumecheng-13732	312	19	insights	insight	NOUN
fumecheng-13732	312	20	into	into	ADP
fumecheng-13732	312	21	the	the	DET
fumecheng-13732	312	22	physical	physical	ADJ
fumecheng-13732	312	23	processes	process	NOUN
fumecheng-13732	312	24	variational	variational	ADJ
fumecheng-13732	312	25	approach	approach	NOUN
fumecheng-13732	312	26	to	to	ADP
fumecheng-13732	312	27	micro	micro	ADJ
fumecheng-13732	312	28	-	-	ADJ
fumecheng-13732	312	29	electro	electro	ADJ
fumecheng-13732	312	30	-	-	PUNCT
fumecheng-13732	312	31	mechanical	mechanical	ADJ
fumecheng-13732	312	32	systems	system	NOUN
fumecheng-13732	312	33	661	661	NUM
fumecheng-13732	312	34	involved	involve	VERB
fumecheng-13732	312	35	.	.	PUNCT
fumecheng-13732	313	1	future	future	ADJ
fumecheng-13732	313	2	research	research	NOUN
fumecheng-13732	313	3	can	can	AUX
fumecheng-13732	313	4	further	far	ADV
fumecheng-13732	313	5	explore	explore	VERB
fumecheng-13732	313	6	the	the	DET
fumecheng-13732	313	7	applications	application	NOUN
fumecheng-13732	313	8	and	and	CCONJ
fumecheng-13732	313	9	implications	implication	NOUN
fumecheng-13732	313	10	of	of	ADP
fumecheng-13732	313	11	this	this	DET
fumecheng-13732	313	12	generalized	generalized	ADJ
fumecheng-13732	313	13	equation	equation	NOUN
fumecheng-13732	313	14	for	for	ADP
fumecheng-13732	313	15	the	the	DET
fumecheng-13732	313	16	development	development	NOUN
fumecheng-13732	313	17	of	of	ADP
fumecheng-13732	313	18	more	more	ADJ
fumecheng-13732	313	19	advanced	advanced	ADJ
fumecheng-13732	313	20	mems	mem	NOUN
fumecheng-13732	313	21	devices	device	NOUN
fumecheng-13732	313	22	.	.	PUNCT
fumecheng-13732	314	1	by	by	ADP
fumecheng-13732	314	2	continuing	continue	VERB
fumecheng-13732	314	3	to	to	PART
fumecheng-13732	314	4	study	study	VERB
fumecheng-13732	314	5	the	the	DET
fumecheng-13732	314	6	behavior	behavior	NOUN
fumecheng-13732	314	7	of	of	ADP
fumecheng-13732	314	8	mems	mem	NOUN
fumecheng-13732	314	9	oscillators	oscillator	NOUN
fumecheng-13732	314	10	under	under	ADP
fumecheng-13732	314	11	different	different	ADJ
fumecheng-13732	314	12	geometric	geometric	ADJ
fumecheng-13732	314	13	and	and	CCONJ
fumecheng-13732	314	14	physical	physical	ADJ
fumecheng-13732	314	15	conditions	condition	NOUN
fumecheng-13732	314	16	,	,	PUNCT
fumecheng-13732	314	17	we	we	PRON
fumecheng-13732	314	18	can	can	AUX
fumecheng-13732	314	19	improve	improve	VERB
fumecheng-13732	314	20	the	the	DET
fumecheng-13732	314	21	design	design	NOUN
fumecheng-13732	314	22	and	and	CCONJ
fumecheng-13732	314	23	performance	performance	NOUN
fumecheng-13732	314	24	of	of	ADP
fumecheng-13732	314	25	these	these	DET
fumecheng-13732	314	26	devices	device	NOUN
fumecheng-13732	314	27	,	,	PUNCT
fumecheng-13732	314	28	leading	lead	VERB
fumecheng-13732	314	29	to	to	ADP
fumecheng-13732	314	30	more	more	ADV
fumecheng-13732	314	31	efficient	efficient	ADJ
fumecheng-13732	314	32	and	and	CCONJ
fumecheng-13732	314	33	reliable	reliable	ADJ
fumecheng-13732	314	34	mems	mem	NOUN
fumecheng-13732	314	35	based	base	VERB
fumecheng-13732	314	36	systems	system	NOUN
fumecheng-13732	314	37	.	.	PUNCT
fumecheng-13732	315	1	the	the	DET
fumecheng-13732	315	2	fractional	fractional	ADJ
fumecheng-13732	315	3	mems	mem	NOUN
fumecheng-13732	315	4	is	be	AUX
fumecheng-13732	315	5	indeed	indeed	ADV
fumecheng-13732	315	6	another	another	DET
fumecheng-13732	315	7	highly	highly	ADV
fumecheng-13732	315	8	captivating	captivating	ADJ
fumecheng-13732	315	9	hot	hot	ADJ
fumecheng-13732	315	10	topic	topic	NOUN
fumecheng-13732	315	11	in	in	ADP
fumecheng-13732	315	12	the	the	DET
fumecheng-13732	315	13	field	field	NOUN
fumecheng-13732	315	14	of	of	ADP
fumecheng-13732	315	15	technology	technology	NOUN
fumecheng-13732	315	16	.	.	PUNCT
fumecheng-13732	316	1	in	in	ADP
fumecheng-13732	316	2	this	this	DET
fumecheng-13732	316	3	domain	domain	NOUN
fumecheng-13732	316	4	,	,	PUNCT
fumecheng-13732	316	5	the	the	DET
fumecheng-13732	316	6	fractional	fractional	ADJ
fumecheng-13732	316	7	derivative	derivative	NOUN
fumecheng-13732	316	8	,	,	PUNCT
fumecheng-13732	316	9	as	as	SCONJ
fumecheng-13732	316	10	demonstrated	demonstrate	VERB
fumecheng-13732	316	11	in	in	ADP
fumecheng-13732	316	12	references	reference	NOUN
fumecheng-13732	316	13	[	[	X
fumecheng-13732	316	14	43	43	NUM
fumecheng-13732	316	15	]	]	PUNCT
fumecheng-13732	316	16	,	,	PUNCT
fumecheng-13732	316	17	plays	play	VERB
fumecheng-13732	316	18	an	an	DET
fumecheng-13732	316	19	absolutely	absolutely	ADV
fumecheng-13732	316	20	crucial	crucial	ADJ
fumecheng-13732	316	21	role	role	NOUN
fumecheng-13732	316	22	.	.	PUNCT
fumecheng-13732	317	1	fractional	fractional	ADJ
fumecheng-13732	317	2	mems	mem	NOUN
fumecheng-13732	317	3	systems	system	NOUN
fumecheng-13732	317	4	truly	truly	ADV
fumecheng-13732	317	5	represent	represent	VERB
fumecheng-13732	317	6	a	a	DET
fumecheng-13732	317	7	remarkable	remarkable	ADJ
fumecheng-13732	317	8	technological	technological	ADJ
fumecheng-13732	317	9	innovation	innovation	NOUN
fumecheng-13732	317	10	.	.	PUNCT
fumecheng-13732	318	1	these	these	DET
fumecheng-13732	318	2	systems	system	NOUN
fumecheng-13732	318	3	are	be	AUX
fumecheng-13732	318	4	an	an	DET
fumecheng-13732	318	5	enthralling	enthralling	ADJ
fumecheng-13732	318	6	combination	combination	NOUN
fumecheng-13732	318	7	of	of	ADP
fumecheng-13732	318	8	advanced	advanced	ADJ
fumecheng-13732	318	9	engineering	engineering	NOUN
fumecheng-13732	318	10	and	and	CCONJ
fumecheng-13732	318	11	profound	profound	ADJ
fumecheng-13732	318	12	mathematical	mathematical	ADJ
fumecheng-13732	318	13	concepts	concept	NOUN
fumecheng-13732	318	14	.	.	PUNCT
fumecheng-13732	319	1	through	through	ADP
fumecheng-13732	319	2	the	the	DET
fumecheng-13732	319	3	incorporation	incorporation	NOUN
fumecheng-13732	319	4	of	of	ADP
fumecheng-13732	319	5	fractional	fractional	ADJ
fumecheng-13732	319	6	calculus	calculus	NOUN
fumecheng-13732	319	7	principles	principle	NOUN
fumecheng-13732	319	8	,	,	PUNCT
fumecheng-13732	319	9	they	they	PRON
fumecheng-13732	319	10	manage	manage	VERB
fumecheng-13732	319	11	to	to	PART
fumecheng-13732	319	12	achieve	achieve	VERB
fumecheng-13732	319	13	not	not	PART
fumecheng-13732	319	14	only	only	ADV
fumecheng-13732	319	15	enhanced	enhanced	ADJ
fumecheng-13732	319	16	performance	performance	NOUN
fumecheng-13732	319	17	but	but	CCONJ
fumecheng-13732	319	18	also	also	ADV
fumecheng-13732	319	19	expanded	expand	VERB
fumecheng-13732	319	20	functionality	functionality	NOUN
fumecheng-13732	319	21	.	.	PUNCT
fumecheng-13732	320	1	the	the	DET
fumecheng-13732	320	2	utilization	utilization	NOUN
fumecheng-13732	320	3	of	of	ADP
fumecheng-13732	320	4	fractional	fractional	ADJ
fumecheng-13732	320	5	derivatives	derivative	NOUN
fumecheng-13732	320	6	enables	enable	VERB
fumecheng-13732	320	7	a	a	DET
fumecheng-13732	320	8	more	more	ADV
fumecheng-13732	320	9	accurate	accurate	ADJ
fumecheng-13732	320	10	description	description	NOUN
fumecheng-13732	320	11	of	of	ADP
fumecheng-13732	320	12	the	the	DET
fumecheng-13732	320	13	intricate	intricate	ADJ
fumecheng-13732	320	14	behaviors	behavior	NOUN
fumecheng-13732	320	15	and	and	CCONJ
fumecheng-13732	320	16	dynamic	dynamic	ADJ
fumecheng-13732	320	17	processes	process	NOUN
fumecheng-13732	320	18	exhibited	exhibit	VERB
fumecheng-13732	320	19	by	by	ADP
fumecheng-13732	320	20	these	these	DET
fumecheng-13732	320	21	miniature	miniature	ADJ
fumecheng-13732	320	22	mechanical	mechanical	ADJ
fumecheng-13732	320	23	and	and	CCONJ
fumecheng-13732	320	24	electrical	electrical	ADJ
fumecheng-13732	320	25	systems	system	NOUN
fumecheng-13732	320	26	.	.	PUNCT
fumecheng-13732	321	1	for	for	ADP
fumecheng-13732	321	2	instance	instance	NOUN
fumecheng-13732	321	3	,	,	PUNCT
fumecheng-13732	321	4	in	in	ADP
fumecheng-13732	321	5	the	the	DET
fumecheng-13732	321	6	area	area	NOUN
fumecheng-13732	321	7	of	of	ADP
fumecheng-13732	321	8	stochastic	stochastic	ADJ
fumecheng-13732	321	9	processes	process	NOUN
fumecheng-13732	321	10	[	[	X
fumecheng-13732	321	11	44	44	NUM
fumecheng-13732	321	12	]	]	PUNCT
fumecheng-13732	321	13	and	and	CCONJ
fumecheng-13732	321	14	adaptive	adaptive	ADJ
fumecheng-13732	321	15	chaos	chaos	NOUN
fumecheng-13732	321	16	control	control	NOUN
fumecheng-13732	322	1	[	[	X
fumecheng-13732	322	2	45	45	NUM
fumecheng-13732	322	3	]	]	PUNCT
fumecheng-13732	322	4	,	,	PUNCT
fumecheng-13732	322	5	the	the	DET
fumecheng-13732	322	6	fractional	fractional	ADJ
fumecheng-13732	322	7	derivative	derivative	NOUN
fumecheng-13732	322	8	has	have	AUX
fumecheng-13732	322	9	shown	show	VERB
fumecheng-13732	322	10	great	great	ADJ
fumecheng-13732	322	11	potential	potential	NOUN
fumecheng-13732	322	12	in	in	ADP
fumecheng-13732	322	13	providing	provide	VERB
fumecheng-13732	322	14	a	a	DET
fumecheng-13732	322	15	deeper	deep	ADJ
fumecheng-13732	322	16	understanding	understanding	NOUN
fumecheng-13732	322	17	and	and	CCONJ
fumecheng-13732	322	18	better	well	ADJ
fumecheng-13732	322	19	control	control	NOUN
fumecheng-13732	322	20	of	of	ADP
fumecheng-13732	322	21	these	these	DET
fumecheng-13732	322	22	complex	complex	ADJ
fumecheng-13732	322	23	phenomena	phenomenon	NOUN
fumecheng-13732	322	24	.	.	PUNCT
fumecheng-13732	323	1	as	as	SCONJ
fumecheng-13732	323	2	research	research	NOUN
fumecheng-13732	323	3	in	in	ADP
fumecheng-13732	323	4	this	this	DET
fumecheng-13732	323	5	field	field	NOUN
fumecheng-13732	323	6	continues	continue	VERB
fumecheng-13732	323	7	to	to	PART
fumecheng-13732	323	8	progress	progress	VERB
fumecheng-13732	323	9	,	,	PUNCT
fumecheng-13732	323	10	fractional	fractional	ADJ
fumecheng-13732	323	11	mems	mem	NOUN
fumecheng-13732	323	12	systems	system	NOUN
fumecheng-13732	323	13	are	be	AUX
fumecheng-13732	323	14	expected	expect	VERB
fumecheng-13732	323	15	to	to	PART
fumecheng-13732	323	16	bring	bring	VERB
fumecheng-13732	323	17	about	about	ADP
fumecheng-13732	323	18	even	even	ADV
fumecheng-13732	323	19	more	more	ADV
fumecheng-13732	323	20	significant	significant	ADJ
fumecheng-13732	323	21	technological	technological	ADJ
fumecheng-13732	323	22	breakthroughs	breakthrough	NOUN
fumecheng-13732	323	23	and	and	CCONJ
fumecheng-13732	323	24	open	open	VERB
fumecheng-13732	323	25	up	up	ADP
fumecheng-13732	323	26	new	new	ADJ
fumecheng-13732	323	27	avenues	avenue	NOUN
fumecheng-13732	323	28	for	for	ADP
fumecheng-13732	323	29	applications	application	NOUN
fumecheng-13732	323	30	in	in	ADP
fumecheng-13732	323	31	various	various	ADJ
fumecheng-13732	323	32	industries	industry	NOUN
fumecheng-13732	323	33	.	.	PUNCT
fumecheng-13732	324	1	other	other	ADJ
fumecheng-13732	324	2	definitions	definition	NOUN
fumecheng-13732	324	3	of	of	ADP
fumecheng-13732	324	4	the	the	DET
fumecheng-13732	324	5	fractional	fractional	ADJ
fumecheng-13732	324	6	derivatives	derivative	NOUN
fumecheng-13732	324	7	can	can	AUX
fumecheng-13732	324	8	be	be	AUX
fumecheng-13732	324	9	modified	modify	VERB
fumecheng-13732	324	10	in	in	ADP
fumecheng-13732	324	11	a	a	DET
fumecheng-13732	324	12	similar	similar	ADJ
fumecheng-13732	324	13	way	way	NOUN
fumecheng-13732	324	14	,	,	PUNCT
fumecheng-13732	324	15	for	for	ADP
fumecheng-13732	324	16	example	example	NOUN
fumecheng-13732	324	17	,	,	PUNCT
fumecheng-13732	324	18	the	the	DET
fumecheng-13732	324	19	caputo	caputo	PROPN
fumecheng-13732	324	20	-	-	PUNCT
fumecheng-13732	324	21	fabrizio	fabrizio	PROPN
fumecheng-13732	324	22	derivative	derivative	NOUN
fumecheng-13732	324	23	and	and	CCONJ
fumecheng-13732	324	24	its	its	PRON
fumecheng-13732	324	25	generalization	generalization	NOUN
fumecheng-13732	324	26	[	[	X
fumecheng-13732	324	27	46	46	NUM
fumecheng-13732	324	28	]	]	PUNCT
fumecheng-13732	324	29	can	can	AUX
fumecheng-13732	324	30	be	be	AUX
fumecheng-13732	324	31	updated	update	VERB
fumecheng-13732	324	32	as	as	ADP
fumecheng-13732	324	33	:	:	PUNCT
fumecheng-13732	324	34	0	0	NUM
fumecheng-13732	324	35	1	1	NUM
fumecheng-13732	324	36	exp	exp	NOUN
fumecheng-13732	324	37	(	(	PUNCT
fumecheng-13732	324	38	)	)	PUNCT
fumecheng-13732	324	39	1	1	NUM
fumecheng-13732	324	40	1	1	NUM
fumecheng-13732	325	1	d	d	NOUN
fumecheng-13732	325	2	t	t	PROPN
fumecheng-13732	325	3	d	d	X
fumecheng-13732	325	4	w	w	PROPN
fumecheng-13732	325	5	w	w	PROPN
fumecheng-13732	325	6	ds	ds	PROPN
fumecheng-13732	325	7	t	t	PROPN
fumecheng-13732	325	8	t	t	NOUN
fumecheng-13732	325	9			X
fumecheng-13732	325	10			X
fumecheng-13732	325	11			X
fumecheng-13732	325	12			X
fumecheng-13732	325	13			X
fumecheng-13732	325	14			ADJ
fumecheng-13732	325	15			NOUN
fumecheng-13732	325	16	=	=	SYM
fumecheng-13732	326	1	−	−	PROPN
fumecheng-13732	326	2	−	−	X
fumecheng-13732	326	3	−	−	PROPN
fumecheng-13732	326	4			NOUN
fumecheng-13732	326	5			X
fumecheng-13732	326	6	(	(	PUNCT
fumecheng-13732	326	7	37	37	NUM
fumecheng-13732	326	8	)	)	PUNCT
fumecheng-13732	326	9	0	0	NUM
fumecheng-13732	326	10	1	1	NUM
fumecheng-13732	326	11	(	(	PUNCT
fumecheng-13732	326	12	,	,	PUNCT
fumecheng-13732	326	13	)	)	PUNCT
fumecheng-13732	326	14	1	1	NUM
fumecheng-13732	326	15	(	(	PUNCT
fumecheng-13732	326	16	,	,	PUNCT
fumecheng-13732	326	17	)	)	PUNCT
fumecheng-13732	327	1	d	d	NOUN
fumecheng-13732	327	2	t	t	PROPN
fumecheng-13732	328	1	d	d	X
fumecheng-13732	328	2	w	w	PROPN
fumecheng-13732	329	1	k	k	PROPN
fumecheng-13732	329	2	s	s	PROPN
fumecheng-13732	329	3	w	w	PROPN
fumecheng-13732	329	4	ds	ds	PROPN
fumecheng-13732	329	5	k	k	PROPN
fumecheng-13732	329	6	tt	tt	PROPN
fumecheng-13732	329	7	t	t	PROPN
fumecheng-13732	329	8			X
fumecheng-13732	329	9			X
fumecheng-13732	329	10			X
fumecheng-13732	329	11			X
fumecheng-13732	329	12			X
fumecheng-13732	329	13			ADJ
fumecheng-13732	329	14			NOUN
fumecheng-13732	329	15	=	=	SYM
fumecheng-13732	329	16	−	−	PROPN
fumecheng-13732	329	17			NOUN
fumecheng-13732	329	18			X
fumecheng-13732	329	19	(	(	PUNCT
fumecheng-13732	329	20	38	38	NUM
fumecheng-13732	329	21	)	)	PUNCT
fumecheng-13732	329	22	we	we	PRON
fumecheng-13732	329	23	give	give	VERB
fumecheng-13732	329	24	a	a	DET
fumecheng-13732	329	25	generalized	generalized	ADJ
fumecheng-13732	329	26	definition	definition	NOUN
fumecheng-13732	329	27	of	of	ADP
fumecheng-13732	329	28	the	the	DET
fumecheng-13732	329	29	two	two	NUM
fumecheng-13732	329	30	-	-	PUNCT
fumecheng-13732	329	31	scale	scale	NOUN
fumecheng-13732	329	32	fractal	fractal	ADJ
fumecheng-13732	329	33	derivative	derivative	NOUN
fumecheng-13732	329	34	based	base	VERB
fumecheng-13732	329	35	fractional	fractional	ADJ
fumecheng-13732	329	36	derivative	derivative	NOUN
fumecheng-13732	329	37	in	in	ADP
fumecheng-13732	329	38	the	the	DET
fumecheng-13732	329	39	forms	form	NOUN
fumecheng-13732	329	40	:	:	PUNCT
fumecheng-13732	329	41	0	0	NUM
fumecheng-13732	329	42	(	(	PUNCT
fumecheng-13732	329	43	)	)	PUNCT
fumecheng-13732	329	44	(	(	PUNCT
fumecheng-13732	329	45	,	,	PUNCT
fumecheng-13732	329	46	)	)	PUNCT
fumecheng-13732	329	47	(	(	PUNCT
fumecheng-13732	329	48	,	,	PUNCT
fumecheng-13732	329	49	)	)	PUNCT
fumecheng-13732	330	1	d	d	NOUN
fumecheng-13732	330	2	t	t	PROPN
fumecheng-13732	330	3	d	d	X
fumecheng-13732	330	4	w	w	PROPN
fumecheng-13732	330	5	w	w	PROPN
fumecheng-13732	330	6	s	s	PROPN
fumecheng-13732	330	7	d	d	X
fumecheng-13732	330	8	t	t	NOUN
fumecheng-13732	330	9	s	s	X
fumecheng-13732	330	10	ds	ds	PROPN
fumecheng-13732	330	11	t	t	NOUN
fumecheng-13732	330	12	s	s	PART
fumecheng-13732	330	13			X
fumecheng-13732	330	14			NOUN
fumecheng-13732	330	15			ADJ
fumecheng-13732	330	16			X
fumecheng-13732	330	17			ADP
fumecheng-13732	330	18			ADJ
fumecheng-13732	330	19			ADJ
fumecheng-13732	330	20	=	=	SYM
fumecheng-13732	330	21			ADJ
fumecheng-13732	330	22			ADJ
fumecheng-13732	330	23			X
fumecheng-13732	330	24	(	(	PUNCT
fumecheng-13732	330	25	39	39	NUM
fumecheng-13732	330	26	)	)	PUNCT
fumecheng-13732	330	27	0	0	NUM
fumecheng-13732	330	28	(	(	PUNCT
fumecheng-13732	330	29	,	,	PUNCT
fumecheng-13732	330	30	)	)	PUNCT
fumecheng-13732	330	31	(	(	PUNCT
fumecheng-13732	330	32	,	,	PUNCT
fumecheng-13732	330	33	)	)	PUNCT
fumecheng-13732	330	34	(	(	PUNCT
fumecheng-13732	330	35	)	)	PUNCT
fumecheng-13732	330	36	d	d	X
fumecheng-13732	330	37	t	t	PROPN
fumecheng-13732	330	38	d	d	X
fumecheng-13732	330	39	w	w	PROPN
fumecheng-13732	330	40	d	d	X
fumecheng-13732	330	41	t	t	PROPN
fumecheng-13732	330	42	s	s	PROPN
fumecheng-13732	330	43	w	w	NOUN
fumecheng-13732	330	44	s	s	X
fumecheng-13732	330	45	ds	ds	PROPN
fumecheng-13732	330	46	t	t	NOUN
fumecheng-13732	330	47	t	t	NOUN
fumecheng-13732	330	48			X
fumecheng-13732	330	49			X
fumecheng-13732	330	50			ADJ
fumecheng-13732	330	51			X
fumecheng-13732	330	52			ADP
fumecheng-13732	330	53			ADJ
fumecheng-13732	330	54			ADJ
fumecheng-13732	330	55	=	=	SYM
fumecheng-13732	330	56			ADJ
fumecheng-13732	330	57			ADJ
fumecheng-13732	330	58			PUNCT
fumecheng-13732	330	59	(	(	PUNCT
fumecheng-13732	330	60	40	40	NUM
fumecheng-13732	330	61	)	)	PUNCT
fumecheng-13732	330	62	where	where	SCONJ
fumecheng-13732	330	63			ADJ
fumecheng-13732	330	64	is	be	AUX
fumecheng-13732	330	65	the	the	DET
fumecheng-13732	330	66	normalization	normalization	NOUN
fumecheng-13732	330	67	function	function	NOUN
fumecheng-13732	330	68	and	and	CCONJ
fumecheng-13732	330	69			NOUN
fumecheng-13732	330	70	is	be	AUX
fumecheng-13732	330	71	the	the	DET
fumecheng-13732	330	72	kern	kern	PROPN
fumecheng-13732	330	73	function	function	NOUN
fumecheng-13732	330	74	.	.	PUNCT
fumecheng-13732	331	1	by	by	ADP
fumecheng-13732	331	2	choosing	choose	VERB
fumecheng-13732	331	3	suitably	suitably	ADV
fumecheng-13732	331	4	the	the	DET
fumecheng-13732	331	5	normalization	normalization	NOUN
fumecheng-13732	331	6	function	function	NOUN
fumecheng-13732	331	7	and	and	CCONJ
fumecheng-13732	331	8	the	the	DET
fumecheng-13732	331	9	kern	kern	PROPN
fumecheng-13732	331	10	function	function	NOUN
fumecheng-13732	331	11	,	,	PUNCT
fumecheng-13732	331	12	the	the	DET
fumecheng-13732	331	13	above	above	ADJ
fumecheng-13732	331	14	definitions	definition	NOUN
fumecheng-13732	331	15	can	can	AUX
fumecheng-13732	331	16	be	be	AUX
fumecheng-13732	331	17	converted	convert	VERB
fumecheng-13732	331	18	to	to	ADP
fumecheng-13732	331	19	a	a	DET
fumecheng-13732	331	20	known	know	VERB
fumecheng-13732	331	21	fractional	fractional	ADJ
fumecheng-13732	331	22	derivative	derivative	NOUN
fumecheng-13732	331	23	,	,	PUNCT
fumecheng-13732	331	24	e.g.	e.g.	ADV
fumecheng-13732	331	25	,	,	PUNCT
fumecheng-13732	331	26	abc	abc	PROPN
fumecheng-13732	331	27	fractional	fractional	VERB
fumecheng-13732	331	28	derivative	derivative	PROPN
fumecheng-13732	332	1	[	[	X
fumecheng-13732	332	2	47	47	NUM
fumecheng-13732	332	3	,	,	PUNCT
fumecheng-13732	332	4	48	48	NUM
fumecheng-13732	332	5	]	]	PUNCT
fumecheng-13732	332	6	.	.	PUNCT
fumecheng-13732	333	1	for	for	ADP
fumecheng-13732	333	2	example	example	NOUN
fumecheng-13732	333	3	.	.	PUNCT
fumecheng-13732	334	1	if	if	SCONJ
fumecheng-13732	334	2	we	we	PRON
fumecheng-13732	334	3	choose	choose	VERB
fumecheng-13732	334	4	:	:	PUNCT
fumecheng-13732	334	5	(	(	PUNCT
fumecheng-13732	334	6	)	)	PUNCT
fumecheng-13732	334	7	(	(	PUNCT
fumecheng-13732	334	8	,	,	PUNCT
fumecheng-13732	334	9	)	)	PUNCT
fumecheng-13732	334	10	1	1	NUM
fumecheng-13732	334	11	(	(	PUNCT
fumecheng-13732	334	12	)	)	PUNCT
fumecheng-13732	334	13	d	d	SYM
fumecheng-13732	334	14	t	t	PROPN
fumecheng-13732	334	15			PROPN
fumecheng-13732	334	16			ADJ
fumecheng-13732	334	17			NOUN
fumecheng-13732	334	18			X
fumecheng-13732	334	19			NOUN
fumecheng-13732	334	20	=	=	PUNCT
fumecheng-13732	334	21	−	−	PROPN
fumecheng-13732	334	22	,	,	PUNCT
fumecheng-13732	334	23	(	(	PUNCT
fumecheng-13732	334	24	41	41	NUM
fumecheng-13732	334	25	)	)	PUNCT
fumecheng-13732	334	26	(	(	PUNCT
fumecheng-13732	334	27	)	)	PUNCT
fumecheng-13732	334	28	(	(	PUNCT
fumecheng-13732	334	29	)	)	PUNCT
fumecheng-13732	334	30	(	(	PUNCT
fumecheng-13732	334	31	,	,	PUNCT
fumecheng-13732	334	32	)	)	PUNCT
fumecheng-13732	334	33	(	(	PUNCT
fumecheng-13732	334	34	)	)	PUNCT
fumecheng-13732	334	35	(	(	PUNCT
fumecheng-13732	334	36	)	)	PUNCT
fumecheng-13732	334	37	1	1	NUM
fumecheng-13732	334	38	t	t	NOUN
fumecheng-13732	334	39	t	t	NOUN
fumecheng-13732	334	40	t	t	NOUN
fumecheng-13732	334	41	s	s	PROPN
fumecheng-13732	334	42	e	e	NOUN
fumecheng-13732	334	43	t	t	PROPN
fumecheng-13732	334	44	s	s	PART
fumecheng-13732	334	45	t	t	NOUN
fumecheng-13732	334	46			X
fumecheng-13732	334	47			X
fumecheng-13732	334	48			NOUN
fumecheng-13732	334	49			X
fumecheng-13732	334	50			NOUN
fumecheng-13732	334	51			PROPN
fumecheng-13732	334	52	=	=	SYM
fumecheng-13732	334	53	−	−	NOUN
fumecheng-13732	334	54			PROPN
fumecheng-13732	334	55	−	−	VERB
fumecheng-13732	334	56			PROPN
fumecheng-13732	334	57	,	,	PUNCT
fumecheng-13732	334	58	(	(	PUNCT
fumecheng-13732	334	59	42	42	NUM
fumecheng-13732	334	60	)	)	PUNCT
fumecheng-13732	334	61	662	662	NUM
fumecheng-13732	335	1	j.h	j.h	PROPN
fumecheng-13732	335	2	.	.	PUNCT
fumecheng-13732	336	1	he	he	PRON
fumecheng-13732	336	2	,	,	PUNCT
fumecheng-13732	336	3	j.	j.	PROPN
fumecheng-13732	336	4	ma	ma	PROPN
fumecheng-13732	336	5	,	,	PUNCT
fumecheng-13732	336	6	a.a	a.a	PROPN
fumecheng-13732	336	7	.	.	PROPN
fumecheng-13732	336	8	alsolam	alsolam	PROPN
fumecheng-13732	336	9	,	,	PUNCT
fumecheng-13732	336	10	c.h	c.h	PROPN
fumecheng-13732	336	11	.	.	PUNCT
fumecheng-13732	337	1	he	he	PRON
fumecheng-13732	337	2	where	where	SCONJ
fumecheng-13732	337	3	ξ(ω	ξ(ω	NOUN
fumecheng-13732	337	4	)	)	PUNCT
fumecheng-13732	337	5	is	be	AUX
fumecheng-13732	337	6	the	the	DET
fumecheng-13732	337	7	normalization	normalization	NOUN
fumecheng-13732	337	8	function	function	NOUN
fumecheng-13732	337	9	,	,	PUNCT
fumecheng-13732	337	10	satisfying	satisfy	VERB
fumecheng-13732	337	11	ξ(0)=	ξ(0)=	NOUN
fumecheng-13732	337	12	ξ(1)=1	ξ(1)=1	PROPN
fumecheng-13732	337	13	,	,	PUNCT
fumecheng-13732	337	14	eω(t	eω(t	NOUN
fumecheng-13732	337	15	)	)	PUNCT
fumecheng-13732	337	16	is	be	AUX
fumecheng-13732	337	17	the	the	DET
fumecheng-13732	337	18	ml	ml	X
fumecheng-13732	337	19	function	function	NOUN
fumecheng-13732	337	20	,	,	PUNCT
fumecheng-13732	337	21	we	we	PRON
fumecheng-13732	337	22	can	can	AUX
fumecheng-13732	337	23	convert	convert	VERB
fumecheng-13732	337	24	eq	eq	ADP
fumecheng-13732	337	25	.	.	PUNCT
fumecheng-13732	338	1	(	(	PUNCT
fumecheng-13732	338	2	39	39	NUM
fumecheng-13732	338	3	)	)	PUNCT
fumecheng-13732	338	4	and	and	CCONJ
fumecheng-13732	338	5	eq	eq	NOUN
fumecheng-13732	338	6	.	.	PUNCT
fumecheng-13732	339	1	(	(	PUNCT
fumecheng-13732	339	2	40	40	NUM
fumecheng-13732	339	3	)	)	PUNCT
fumecheng-13732	339	4	to	to	ADP
fumecheng-13732	339	5	a	a	DET
fumecheng-13732	339	6	modified	modify	VERB
fumecheng-13732	339	7	abc	abc	PROPN
fumecheng-13732	339	8	fractional	fractional	ADJ
fumecheng-13732	339	9	derivative	derivative	NOUN
fumecheng-13732	340	1	[	[	X
fumecheng-13732	340	2	47	47	NUM
fumecheng-13732	340	3	,	,	PUNCT
fumecheng-13732	340	4	48	48	NUM
fumecheng-13732	340	5	]	]	PUNCT
fumecheng-13732	340	6	.	.	PUNCT
fumecheng-13732	341	1	here	here	ADV
fumecheng-13732	341	2	,	,	PUNCT
fumecheng-13732	341	3	we	we	PRON
fumecheng-13732	341	4	introduce	introduce	VERB
fumecheng-13732	341	5	the	the	DET
fumecheng-13732	341	6	two	two	NUM
fumecheng-13732	341	7	-	-	PUNCT
fumecheng-13732	341	8	scale	scale	NOUN
fumecheng-13732	341	9	fractal	fractal	ADJ
fumecheng-13732	341	10	derivative	derivative	NOUN
fumecheng-13732	341	11	based	base	VERB
fumecheng-13732	341	12	fractional	fractional	ADJ
fumecheng-13732	341	13	derivative	derivative	NOUN
fumecheng-13732	341	14	.	.	PUNCT
fumecheng-13732	342	1	in	in	ADP
fumecheng-13732	342	2	this	this	DET
fumecheng-13732	342	3	context	context	NOUN
fumecheng-13732	342	4	,	,	PUNCT
fumecheng-13732	342	5	within	within	ADP
fumecheng-13732	342	6	the	the	DET
fumecheng-13732	342	7	known	know	VERB
fumecheng-13732	342	8	fractional	fractional	ADJ
fumecheng-13732	342	9	derivative	derivative	NOUN
fumecheng-13732	342	10	,	,	PUNCT
fumecheng-13732	342	11	the	the	DET
fumecheng-13732	342	12	traditional	traditional	ADJ
fumecheng-13732	342	13	derivatives	derivative	NOUN
fumecheng-13732	342	14	are	be	AUX
fumecheng-13732	342	15	replaced	replace	VERB
fumecheng-13732	342	16	by	by	ADP
fumecheng-13732	342	17	the	the	DET
fumecheng-13732	342	18	two	two	NUM
fumecheng-13732	342	19	-	-	PUNCT
fumecheng-13732	342	20	scale	scale	NOUN
fumecheng-13732	342	21	fractal	fractal	ADJ
fumecheng-13732	342	22	derivative	derivative	NOUN
fumecheng-13732	342	23	.	.	PUNCT
fumecheng-13732	343	1	for	for	ADP
fumecheng-13732	343	2	example	example	NOUN
fumecheng-13732	343	3	,	,	PUNCT
fumecheng-13732	343	4	the	the	DET
fumecheng-13732	343	5	caputo	caputo	PROPN
fumecheng-13732	343	6	fractional	fractional	PROPN
fumecheng-13732	343	7	derivative	derivative	PROPN
fumecheng-13732	343	8	and	and	CCONJ
fumecheng-13732	343	9	riemann	riemann	PROPN
fumecheng-13732	343	10	-	-	PUNCT
fumecheng-13732	343	11	liouville	liouville	VERB
fumecheng-13732	343	12	fractional	fractional	ADJ
fumecheng-13732	343	13	derivative	derivative	NOUN
fumecheng-13732	343	14	are	be	AUX
fumecheng-13732	343	15	updated	update	VERB
fumecheng-13732	343	16	respectively	respectively	ADV
fumecheng-13732	343	17	in	in	ADP
fumecheng-13732	343	18	the	the	DET
fumecheng-13732	343	19	following	follow	VERB
fumecheng-13732	343	20	manner	manner	NOUN
fumecheng-13732	343	21	:	:	PUNCT
fumecheng-13732	343	22	1	1	NUM
fumecheng-13732	343	23	0	0	NUM
fumecheng-13732	343	24	1	1	NUM
fumecheng-13732	343	25	(	(	PUNCT
fumecheng-13732	343	26	)	)	PUNCT
fumecheng-13732	343	27	(	(	PUNCT
fumecheng-13732	343	28	)	)	PUNCT
fumecheng-13732	343	29	(	(	PUNCT
fumecheng-13732	343	30	)	)	PUNCT
fumecheng-13732	344	1	d	d	X
fumecheng-13732	344	2	t	t	PROPN
fumecheng-13732	345	1	d	d	X
fumecheng-13732	345	2	d	d	PROPN
fumecheng-13732	345	3	w	w	PROPN
fumecheng-13732	345	4	w	w	PROPN
fumecheng-13732	345	5	s	s	PROPN
fumecheng-13732	345	6	t	t	NOUN
fumecheng-13732	345	7	s	s	X
fumecheng-13732	345	8	ds	ds	ADJ
fumecheng-13732	345	9	dt	dt	X
fumecheng-13732	345	10	s	s	PART
fumecheng-13732	345	11			NOUN
fumecheng-13732	345	12			X
fumecheng-13732	345	13			X
fumecheng-13732	345	14			X
fumecheng-13732	345	15	−	−	PRON
fumecheng-13732	345	16	−	−	PROPN
fumecheng-13732	345	17			NOUN
fumecheng-13732	345	18	=	=	SYM
fumecheng-13732	345	19	−	−	ADP
fumecheng-13732	345	20			VERB
fumecheng-13732	345	21	−	−	PROPN
fumecheng-13732	345	22			NOUN
fumecheng-13732	345	23			X
fumecheng-13732	345	24	,	,	PUNCT
fumecheng-13732	345	25	(	(	PUNCT
fumecheng-13732	345	26	43	43	NUM
fumecheng-13732	345	27	)	)	PUNCT
fumecheng-13732	345	28	1	1	NUM
fumecheng-13732	345	29	0	0	NUM
fumecheng-13732	345	30	1	1	NUM
fumecheng-13732	345	31	(	(	PUNCT
fumecheng-13732	345	32	)	)	PUNCT
fumecheng-13732	345	33	(	(	PUNCT
fumecheng-13732	345	34	)	)	PUNCT
fumecheng-13732	345	35	(	(	PUNCT
fumecheng-13732	345	36	)	)	PUNCT
fumecheng-13732	346	1	d	d	X
fumecheng-13732	346	2	t	t	PROPN
fumecheng-13732	347	1	d	d	X
fumecheng-13732	347	2	d	d	PROPN
fumecheng-13732	347	3	w	w	PROPN
fumecheng-13732	347	4	t	t	PROPN
fumecheng-13732	347	5	s	s	PROPN
fumecheng-13732	347	6	w	w	NOUN
fumecheng-13732	347	7	s	s	X
fumecheng-13732	347	8	ds	ds	ADJ
fumecheng-13732	347	9	dt	dt	X
fumecheng-13732	347	10	t	t	PROPN
fumecheng-13732	347	11			X
fumecheng-13732	347	12			X
fumecheng-13732	347	13			X
fumecheng-13732	347	14			X
fumecheng-13732	347	15	−	−	PRON
fumecheng-13732	347	16	−	−	PROPN
fumecheng-13732	347	17			NOUN
fumecheng-13732	347	18	=	=	SYM
fumecheng-13732	347	19	−	−	ADP
fumecheng-13732	347	20			VERB
fumecheng-13732	347	21	−	−	PROPN
fumecheng-13732	347	22			NOUN
fumecheng-13732	347	23			X
fumecheng-13732	347	24	.	.	PUNCT
fumecheng-13732	348	1	(	(	PUNCT
fumecheng-13732	348	2	44	44	NUM
fumecheng-13732	348	3	)	)	PUNCT
fumecheng-13732	348	4	when	when	SCONJ
fumecheng-13732	348	5	d=1	d=1	NOUN
fumecheng-13732	348	6	,	,	PUNCT
fumecheng-13732	348	7	eq	eq	NOUN
fumecheng-13732	348	8	.	.	PUNCT
fumecheng-13732	348	9	(	(	PUNCT
fumecheng-13732	348	10	43	43	NUM
fumecheng-13732	348	11	)	)	PUNCT
fumecheng-13732	348	12	and	and	CCONJ
fumecheng-13732	348	13	eq	eq	NOUN
fumecheng-13732	348	14	.	.	PUNCT
fumecheng-13732	349	1	(	(	PUNCT
fumecheng-13732	349	2	44	44	NUM
fumecheng-13732	349	3	)	)	PUNCT
fumecheng-13732	349	4	turn	turn	VERB
fumecheng-13732	349	5	back	back	ADV
fumecheng-13732	349	6	to	to	ADP
fumecheng-13732	349	7	caputo	caputo	PROPN
fumecheng-13732	349	8	fractional	fractional	PROPN
fumecheng-13732	349	9	derivative	derivative	PROPN
fumecheng-13732	349	10	and	and	CCONJ
fumecheng-13732	349	11	riemannliouville	riemannliouville	ADJ
fumecheng-13732	349	12	fractional	fractional	ADJ
fumecheng-13732	349	13	derivative	derivative	NOUN
fumecheng-13732	349	14	,	,	PUNCT
fumecheng-13732	349	15	respectively	respectively	ADV
fumecheng-13732	349	16	.	.	PUNCT
fumecheng-13732	350	1	6	6	X
fumecheng-13732	350	2	.	.	X
fumecheng-13732	350	3	conclusions	conclusion	NOUN
fumecheng-13732	350	4	in	in	ADP
fumecheng-13732	350	5	conclusion	conclusion	NOUN
fumecheng-13732	350	6	,	,	PUNCT
fumecheng-13732	350	7	this	this	DET
fumecheng-13732	350	8	study	study	NOUN
fumecheng-13732	350	9	has	have	AUX
fumecheng-13732	350	10	yielded	yield	VERB
fumecheng-13732	350	11	several	several	ADJ
fumecheng-13732	350	12	significant	significant	ADJ
fumecheng-13732	350	13	new	new	ADJ
fumecheng-13732	350	14	findings	finding	NOUN
fumecheng-13732	350	15	,	,	PUNCT
fumecheng-13732	350	16	with	with	ADP
fumecheng-13732	350	17	particular	particular	ADJ
fumecheng-13732	350	18	emphasis	emphasis	NOUN
fumecheng-13732	350	19	on	on	ADP
fumecheng-13732	350	20	demonstrating	demonstrate	VERB
fumecheng-13732	350	21	the	the	DET
fumecheng-13732	350	22	practical	practical	ADJ
fumecheng-13732	350	23	utility	utility	NOUN
fumecheng-13732	350	24	of	of	ADP
fumecheng-13732	350	25	the	the	DET
fumecheng-13732	350	26	proposed	propose	VERB
fumecheng-13732	350	27	variational	variational	ADJ
fumecheng-13732	350	28	principle	principle	NOUN
fumecheng-13732	350	29	through	through	ADP
fumecheng-13732	350	30	a	a	DET
fumecheng-13732	350	31	specific	specific	ADJ
fumecheng-13732	350	32	mems	mem	NOUN
fumecheng-13732	350	33	system	system	NOUN
fumecheng-13732	350	34	.	.	PUNCT
fumecheng-13732	351	1	firstly	firstly	ADV
fumecheng-13732	351	2	,	,	PUNCT
fumecheng-13732	351	3	the	the	DET
fumecheng-13732	351	4	application	application	NOUN
fumecheng-13732	351	5	of	of	ADP
fumecheng-13732	351	6	the	the	DET
fumecheng-13732	351	7	semi	semi	ADJ
fumecheng-13732	351	8	-	-	ADJ
fumecheng-13732	351	9	inverse	inverse	ADJ
fumecheng-13732	351	10	method	method	NOUN
fumecheng-13732	351	11	to	to	PART
fumecheng-13732	351	12	establish	establish	VERB
fumecheng-13732	351	13	a	a	DET
fumecheng-13732	351	14	new	new	ADJ
fumecheng-13732	351	15	variational	variational	ADJ
fumecheng-13732	351	16	principle	principle	NOUN
fumecheng-13732	351	17	for	for	ADP
fumecheng-13732	351	18	mems	mem	NOUN
fumecheng-13732	351	19	systems	system	NOUN
fumecheng-13732	351	20	has	have	AUX
fumecheng-13732	351	21	proven	prove	VERB
fumecheng-13732	351	22	to	to	PART
fumecheng-13732	351	23	be	be	AUX
fumecheng-13732	351	24	a	a	DET
fumecheng-13732	351	25	groundbreaking	groundbreake	VERB
fumecheng-13732	351	26	advancement	advancement	NOUN
fumecheng-13732	351	27	.	.	PUNCT
fumecheng-13732	352	1	it	it	PRON
fumecheng-13732	352	2	surpasses	surpass	VERB
fumecheng-13732	352	3	certain	certain	ADJ
fumecheng-13732	352	4	limitations	limitation	NOUN
fumecheng-13732	352	5	of	of	ADP
fumecheng-13732	352	6	traditional	traditional	ADJ
fumecheng-13732	352	7	variational	variational	ADJ
fumecheng-13732	352	8	approaches	approach	NOUN
fumecheng-13732	352	9	by	by	ADP
fumecheng-13732	352	10	offering	offer	VERB
fumecheng-13732	352	11	a	a	DET
fumecheng-13732	352	12	more	more	ADV
fumecheng-13732	352	13	precise	precise	ADJ
fumecheng-13732	352	14	portrayal	portrayal	NOUN
fumecheng-13732	352	15	of	of	ADP
fumecheng-13732	352	16	the	the	DET
fumecheng-13732	352	17	physical	physical	ADJ
fumecheng-13732	352	18	behavior	behavior	NOUN
fumecheng-13732	352	19	of	of	ADP
fumecheng-13732	352	20	mems	mem	NOUN
fumecheng-13732	352	21	devices	device	NOUN
fumecheng-13732	352	22	,	,	PUNCT
fumecheng-13732	352	23	facilitating	facilitate	VERB
fumecheng-13732	352	24	enhanced	enhanced	ADJ
fumecheng-13732	352	25	prediction	prediction	NOUN
fumecheng-13732	352	26	of	of	ADP
fumecheng-13732	352	27	their	their	PRON
fumecheng-13732	352	28	performance	performance	NOUN
fumecheng-13732	352	29	,	,	PUNCT
fumecheng-13732	352	30	and	and	CCONJ
fumecheng-13732	352	31	presenting	present	VERB
fumecheng-13732	352	32	improved	improved	ADJ
fumecheng-13732	352	33	computational	computational	ADJ
fumecheng-13732	352	34	efficiency	efficiency	NOUN
fumecheng-13732	352	35	,	,	PUNCT
fumecheng-13732	352	36	which	which	PRON
fumecheng-13732	352	37	is	be	AUX
fumecheng-13732	352	38	vital	vital	ADJ
fumecheng-13732	352	39	for	for	ADP
fumecheng-13732	352	40	design	design	NOUN
fumecheng-13732	352	41	and	and	CCONJ
fumecheng-13732	352	42	optimization	optimization	NOUN
fumecheng-13732	352	43	procedures	procedure	NOUN
fumecheng-13732	352	44	demanding	demand	VERB
fumecheng-13732	352	45	multiple	multiple	ADJ
fumecheng-13732	352	46	simulations	simulation	NOUN
fumecheng-13732	352	47	.	.	PUNCT
fumecheng-13732	353	1	this	this	PRON
fumecheng-13732	353	2	underscores	underscore	VERB
fumecheng-13732	353	3	the	the	DET
fumecheng-13732	353	4	semiinverse	semiinverse	NOUN
fumecheng-13732	353	5	method	method	NOUN
fumecheng-13732	353	6	as	as	ADP
fumecheng-13732	353	7	a	a	DET
fumecheng-13732	353	8	potent	potent	ADJ
fumecheng-13732	353	9	tool	tool	NOUN
fumecheng-13732	353	10	for	for	ADP
fumecheng-13732	353	11	handling	handle	VERB
fumecheng-13732	353	12	the	the	DET
fumecheng-13732	353	13	intricate	intricate	ADJ
fumecheng-13732	353	14	nature	nature	NOUN
fumecheng-13732	353	15	of	of	ADP
fumecheng-13732	353	16	mems	mem	NOUN
fumecheng-13732	353	17	systems	system	NOUN
fumecheng-13732	353	18	.	.	PUNCT
fumecheng-13732	354	1	to	to	PART
fumecheng-13732	354	2	illustrate	illustrate	VERB
fumecheng-13732	354	3	concretely	concretely	ADV
fumecheng-13732	354	4	the	the	DET
fumecheng-13732	354	5	applicability	applicability	NOUN
fumecheng-13732	354	6	of	of	ADP
fumecheng-13732	354	7	this	this	DET
fumecheng-13732	354	8	new	new	ADJ
fumecheng-13732	354	9	variational	variational	ADJ
fumecheng-13732	354	10	principle	principle	NOUN
fumecheng-13732	354	11	,	,	PUNCT
fumecheng-13732	354	12	we	we	PRON
fumecheng-13732	354	13	focused	focus	VERB
fumecheng-13732	354	14	on	on	ADP
fumecheng-13732	354	15	a	a	DET
fumecheng-13732	354	16	specific	specific	ADJ
fumecheng-13732	354	17	case	case	NOUN
fumecheng-13732	354	18	:	:	PUNCT
fumecheng-13732	354	19	mems	mems	ADJ
fumecheng-13732	354	20	pressure	pressure	NOUN
fumecheng-13732	354	21	sensors	sensor	NOUN
fumecheng-13732	354	22	integrated	integrate	VERB
fumecheng-13732	354	23	into	into	ADP
fumecheng-13732	354	24	wearable	wearable	ADJ
fumecheng-13732	354	25	textiles	textile	NOUN
fumecheng-13732	354	26	[	[	X
fumecheng-13732	354	27	49	49	NUM
fumecheng-13732	354	28	]	]	PUNCT
fumecheng-13732	354	29	.	.	PUNCT
fumecheng-13732	355	1	these	these	DET
fumecheng-13732	355	2	sensors	sensor	NOUN
fumecheng-13732	355	3	are	be	AUX
fumecheng-13732	355	4	critical	critical	ADJ
fumecheng-13732	355	5	for	for	ADP
fumecheng-13732	355	6	real	real	ADJ
fumecheng-13732	355	7	-	-	PUNCT
fumecheng-13732	355	8	time	time	NOUN
fumecheng-13732	355	9	physiological	physiological	ADJ
fumecheng-13732	355	10	monitoring	monitoring	NOUN
fumecheng-13732	355	11	(	(	PUNCT
fumecheng-13732	355	12	e.g.	e.g.	ADV
fumecheng-13732	355	13	,	,	PUNCT
fumecheng-13732	355	14	heart	heart	NOUN
fumecheng-13732	355	15	rate	rate	NOUN
fumecheng-13732	355	16	,	,	PUNCT
fumecheng-13732	355	17	respiratory	respiratory	ADJ
fumecheng-13732	355	18	rate	rate	NOUN
fumecheng-13732	355	19	,	,	PUNCT
fumecheng-13732	355	20	and	and	CCONJ
fumecheng-13732	355	21	body	body	NOUN
fumecheng-13732	355	22	temperature	temperature	NOUN
fumecheng-13732	355	23	)	)	PUNCT
fumecheng-13732	355	24	due	due	ADP
fumecheng-13732	355	25	to	to	ADP
fumecheng-13732	355	26	their	their	PRON
fumecheng-13732	355	27	miniaturization	miniaturization	NOUN
fumecheng-13732	355	28	,	,	PUNCT
fumecheng-13732	355	29	flexibility	flexibility	NOUN
fumecheng-13732	355	30	,	,	PUNCT
fumecheng-13732	355	31	and	and	CCONJ
fumecheng-13732	355	32	low	low	ADJ
fumecheng-13732	355	33	power	power	NOUN
fumecheng-13732	355	34	consumption	consumption	NOUN
fumecheng-13732	355	35	.	.	PUNCT
fumecheng-13732	356	1	however	however	ADV
fumecheng-13732	356	2	,	,	PUNCT
fumecheng-13732	356	3	their	their	PRON
fumecheng-13732	356	4	reliability	reliability	NOUN
fumecheng-13732	356	5	is	be	AUX
fumecheng-13732	356	6	heavily	heavily	ADV
fumecheng-13732	356	7	constrained	constrain	VERB
fumecheng-13732	356	8	by	by	ADP
fumecheng-13732	356	9	pull	pull	NOUN
fumecheng-13732	356	10	-	-	PUNCT
fumecheng-13732	356	11	in	in	ADP
fumecheng-13732	356	12	instability	instability	NOUN
fumecheng-13732	356	13	,	,	PUNCT
fumecheng-13732	356	14	which	which	PRON
fumecheng-13732	356	15	can	can	AUX
fumecheng-13732	356	16	lead	lead	VERB
fumecheng-13732	356	17	to	to	ADP
fumecheng-13732	356	18	sudden	sudden	ADJ
fumecheng-13732	356	19	performance	performance	NOUN
fumecheng-13732	356	20	degradation	degradation	NOUN
fumecheng-13732	356	21	or	or	CCONJ
fumecheng-13732	356	22	failure	failure	NOUN
fumecheng-13732	356	23	under	under	ADP
fumecheng-13732	356	24	dynamic	dynamic	ADJ
fumecheng-13732	356	25	physiological	physiological	ADJ
fumecheng-13732	356	26	conditions	condition	NOUN
fumecheng-13732	356	27	.	.	PUNCT
fumecheng-13732	357	1	the	the	DET
fumecheng-13732	357	2	proposed	propose	VERB
fumecheng-13732	357	3	variational	variational	ADJ
fumecheng-13732	357	4	principle	principle	NOUN
fumecheng-13732	357	5	directly	directly	ADV
fumecheng-13732	357	6	addresses	address	VERB
fumecheng-13732	357	7	this	this	DET
fumecheng-13732	357	8	challenge	challenge	NOUN
fumecheng-13732	357	9	.	.	PUNCT
fumecheng-13732	358	1	for	for	ADP
fumecheng-13732	358	2	the	the	DET
fumecheng-13732	358	3	mems	mems	PROPN
fumecheng-13732	358	4	pressure	pressure	NOUN
fumecheng-13732	358	5	sensor	sensor	NOUN
fumecheng-13732	358	6	,	,	PUNCT
fumecheng-13732	358	7	we	we	PRON
fumecheng-13732	358	8	applied	apply	VERB
fumecheng-13732	358	9	the	the	DET
fumecheng-13732	358	10	new	new	ADJ
fumecheng-13732	358	11	formulation	formulation	NOUN
fumecheng-13732	358	12	to	to	PART
fumecheng-13732	358	13	model	model	VERB
fumecheng-13732	358	14	the	the	DET
fumecheng-13732	358	15	electrostatic	electrostatic	ADJ
fumecheng-13732	358	16	-	-	PUNCT
fumecheng-13732	358	17	mechanical	mechanical	ADJ
fumecheng-13732	358	18	coupling	couple	VERB
fumecheng-13732	358	19	behavior	behavior	NOUN
fumecheng-13732	358	20	,	,	PUNCT
fumecheng-13732	358	21	where	where	SCONJ
fumecheng-13732	358	22	the	the	DET
fumecheng-13732	358	23	sensor	sensor	NOUN
fumecheng-13732	358	24	’s	’s	PART
fumecheng-13732	358	25	diaphragm	diaphragm	PROPN
fumecheng-13732	358	26	displacement	displacement	NOUN
fumecheng-13732	358	27	,	,	PUNCT
fumecheng-13732	358	28	w	w	NOUN
fumecheng-13732	358	29	,	,	PUNCT
fumecheng-13732	358	30	and	and	CCONJ
fumecheng-13732	358	31	voltage	voltage	NOUN
fumecheng-13732	358	32	-	-	PUNCT
fumecheng-13732	358	33	related	relate	VERB
fumecheng-13732	358	34	parameter	parameter	NOUN
fumecheng-13732	358	35	,	,	PUNCT
fumecheng-13732	358	36	m	m	PRON
fumecheng-13732	358	37	,	,	PUNCT
fumecheng-13732	358	38	are	be	AUX
fumecheng-13732	358	39	the	the	DET
fumecheng-13732	358	40	core	core	NOUN
fumecheng-13732	358	41	variables	variable	NOUN
fumecheng-13732	358	42	.	.	PUNCT
fumecheng-13732	359	1	using	use	VERB
fumecheng-13732	359	2	the	the	DET
fumecheng-13732	359	3	derived	derived	ADJ
fumecheng-13732	359	4	criterion	criterion	NOUN
fumecheng-13732	359	5	for	for	ADP
fumecheng-13732	359	6	pull	pull	NOUN
fumecheng-13732	359	7	-	-	PUNCT
fumecheng-13732	359	8	in	in	ADP
fumecheng-13732	359	9	instability	instability	NOUN
fumecheng-13732	359	10	(	(	PUNCT
fumecheng-13732	359	11	simultaneous	simultaneous	ADJ
fumecheng-13732	359	12	zero	zero	NUM
fumecheng-13732	359	13	kinetic	kinetic	ADJ
fumecheng-13732	359	14	energy	energy	NOUN
fumecheng-13732	359	15	and	and	CCONJ
fumecheng-13732	359	16	accelerated	accelerate	VERB
fumecheng-13732	359	17	speed	speed	NOUN
fumecheng-13732	359	18	)	)	PUNCT
fumecheng-13732	359	19	,	,	PUNCT
fumecheng-13732	359	20	we	we	PRON
fumecheng-13732	359	21	computed	compute	VERB
fumecheng-13732	359	22	the	the	DET
fumecheng-13732	359	23	pull	pull	NOUN
fumecheng-13732	359	24	-	-	PUNCT
fumecheng-13732	359	25	in	in	ADP
fumecheng-13732	359	26	voltage	voltage	NOUN
fumecheng-13732	359	27	with	with	ADP
fumecheng-13732	359	28	higher	high	ADJ
fumecheng-13732	359	29	precision	precision	NOUN
fumecheng-13732	359	30	compared	compare	VERB
fumecheng-13732	359	31	to	to	ADP
fumecheng-13732	359	32	traditional	traditional	ADJ
fumecheng-13732	359	33	methods	method	NOUN
fumecheng-13732	359	34	.	.	PUNCT
fumecheng-13732	360	1	specifically	specifically	ADV
fumecheng-13732	360	2	,	,	PUNCT
fumecheng-13732	360	3	the	the	DET
fumecheng-13732	360	4	variational	variational	ADJ
fumecheng-13732	360	5	principle	principle	NOUN
fumecheng-13732	360	6	enabled	enable	VERB
fumecheng-13732	360	7	us	we	PRON
fumecheng-13732	360	8	to	to	PART
fumecheng-13732	360	9	incorporate	incorporate	VERB
fumecheng-13732	360	10	microscale	microscale	ADJ
fumecheng-13732	360	11	effects	effect	NOUN
fumecheng-13732	360	12	(	(	PUNCT
fumecheng-13732	360	13	e.g.	e.g.	ADV
fumecheng-13732	360	14	,	,	PUNCT
fumecheng-13732	360	15	surface	surface	NOUN
fumecheng-13732	360	16	tension	tension	NOUN
fumecheng-13732	360	17	and	and	CCONJ
fumecheng-13732	360	18	fractal	fractal	ADJ
fumecheng-13732	360	19	surface	surface	NOUN
fumecheng-13732	360	20	roughness	roughness	NOUN
fumecheng-13732	360	21	)	)	PUNCT
fumecheng-13732	360	22	that	that	PRON
fumecheng-13732	360	23	are	be	AUX
fumecheng-13732	360	24	critical	critical	ADJ
fumecheng-13732	360	25	for	for	ADP
fumecheng-13732	360	26	wearable	wearable	ADJ
fumecheng-13732	360	27	applications	application	NOUN
fumecheng-13732	360	28	but	but	CCONJ
fumecheng-13732	360	29	often	often	ADV
fumecheng-13732	360	30	overlooked	overlook	VERB
fumecheng-13732	360	31	in	in	ADP
fumecheng-13732	360	32	conventional	conventional	ADJ
fumecheng-13732	360	33	models	model	NOUN
fumecheng-13732	360	34	.	.	PUNCT
fumecheng-13732	361	1	furthermore	furthermore	ADV
fumecheng-13732	361	2	,	,	PUNCT
fumecheng-13732	361	3	the	the	DET
fumecheng-13732	361	4	two	two	NUM
fumecheng-13732	361	5	-	-	PUNCT
fumecheng-13732	361	6	scale	scale	NOUN
fumecheng-13732	361	7	fractal	fractal	ADJ
fumecheng-13732	361	8	derivative	derivative	NOUN
fumecheng-13732	361	9	-	-	PUNCT
fumecheng-13732	361	10	based	base	VERB
fumecheng-13732	361	11	fractional	fractional	ADJ
fumecheng-13732	361	12	modeling	modeling	NOUN
fumecheng-13732	361	13	,	,	PUNCT
fumecheng-13732	361	14	integrated	integrate	VERB
fumecheng-13732	361	15	with	with	ADP
fumecheng-13732	361	16	the	the	DET
fumecheng-13732	361	17	variational	variational	ADJ
fumecheng-13732	361	18	principle	principle	NOUN
fumecheng-13732	361	19	,	,	PUNCT
fumecheng-13732	361	20	enhanced	enhance	VERB
fumecheng-13732	361	21	the	the	DET
fumecheng-13732	361	22	accuracy	accuracy	NOUN
fumecheng-13732	361	23	of	of	ADP
fumecheng-13732	361	24	predicting	predict	VERB
fumecheng-13732	361	25	the	the	DET
fumecheng-13732	361	26	sensor	sensor	NOUN
fumecheng-13732	361	27	’s	’s	PART
fumecheng-13732	361	28	dynamic	dynamic	ADJ
fumecheng-13732	361	29	response	response	NOUN
fumecheng-13732	361	30	under	under	ADP
fumecheng-13732	361	31	varying	vary	VERB
fumecheng-13732	361	32	fractal	fractal	ADJ
fumecheng-13732	361	33	surface	surface	NOUN
fumecheng-13732	361	34	geometries	geometry	NOUN
fumecheng-13732	361	35	,	,	PUNCT
fumecheng-13732	361	36	which	which	PRON
fumecheng-13732	361	37	is	be	AUX
fumecheng-13732	361	38	common	common	ADJ
fumecheng-13732	361	39	in	in	ADP
fumecheng-13732	361	40	wearable	wearable	ADJ
fumecheng-13732	361	41	textiles	textile	NOUN
fumecheng-13732	361	42	https://zh.wikipedia.org/wiki/%ce%9e	https://zh.wikipedia.org/wiki/%ce%9e	NOUN
fumecheng-13732	362	1	https://baike.baidu.com/item/%e5%b8%8c%e8%85%8a%e5%ad%97%e6%af%8d/4428067#3-25	https://baike.baidu.com/item/%e5%b8%8c%e8%85%8a%e5%ad%97%e6%af%8d/4428067#3-25	PROPN
fumecheng-13732	362	2	https://zh.wikipedia.org/wiki/%ce%9e	https://zh.wikipedia.org/wiki/%ce%9e	PROPN
fumecheng-13732	363	1	https://baike.baidu.com/item/%e5%b8%8c%e8%85%8a%e5%ad%97%e6%af%8d/4428067#3-25	https://baike.baidu.com/item/%e5%b8%8c%e8%85%8a%e5%ad%97%e6%af%8d/4428067#3-25	PROPN
fumecheng-13732	363	2	https://zh.wikipedia.org/wiki/%ce%9e	https://zh.wikipedia.org/wiki/%ce%9e	PROPN
fumecheng-13732	363	3	https://baike.baidu.com/item/%e5%b8%8c%e8%85%8a%e5%ad%97%e6%af%8d/4428067#3-25	https://baike.baidu.com/item/%e5%b8%8c%e8%85%8a%e5%ad%97%e6%af%8d/4428067#3-25	PROPN
fumecheng-13732	363	4	https://baike.baidu.com/item/%e5%b8%8c%e8%85%8a%e5%ad%97%e6%af%8d/4428067#3-25	https://baike.baidu.com/item/%e5%b8%8c%e8%85%8a%e5%ad%97%e6%af%8d/4428067#3-25	PROPN
fumecheng-13732	364	1	variational	variational	ADJ
fumecheng-13732	364	2	approach	approach	NOUN
fumecheng-13732	364	3	to	to	ADP
fumecheng-13732	364	4	micro	micro	ADJ
fumecheng-13732	364	5	-	-	ADJ
fumecheng-13732	364	6	electro	electro	ADJ
fumecheng-13732	364	7	-	-	PUNCT
fumecheng-13732	364	8	mechanical	mechanical	ADJ
fumecheng-13732	364	9	systems	system	NOUN
fumecheng-13732	364	10	663	663	NUM
fumecheng-13732	364	11	due	due	ADJ
fumecheng-13732	364	12	to	to	ADP
fumecheng-13732	364	13	fabric	fabric	NOUN
fumecheng-13732	364	14	texture	texture	NOUN
fumecheng-13732	364	15	.	.	PUNCT
fumecheng-13732	365	1	this	this	DET
fumecheng-13732	365	2	integration	integration	NOUN
fumecheng-13732	365	3	allowed	allow	VERB
fumecheng-13732	365	4	us	we	PRON
fumecheng-13732	365	5	to	to	PART
fumecheng-13732	365	6	quantify	quantify	VERB
fumecheng-13732	365	7	how	how	SCONJ
fumecheng-13732	365	8	surface	surface	NOUN
fumecheng-13732	365	9	roughness	roughness	NOUN
fumecheng-13732	365	10	(	(	PUNCT
fumecheng-13732	365	11	characterized	characterize	VERB
fumecheng-13732	365	12	by	by	ADP
fumecheng-13732	365	13	fractal	fractal	ADJ
fumecheng-13732	365	14	dimension	dimension	NOUN
fumecheng-13732	365	15	d	d	NOUN
fumecheng-13732	365	16	)	)	PUNCT
fumecheng-13732	365	17	influences	influence	NOUN
fumecheng-13732	365	18	pull	pull	NOUN
fumecheng-13732	365	19	-	-	PUNCT
fumecheng-13732	365	20	in	in	ADP
fumecheng-13732	365	21	behavior	behavior	NOUN
fumecheng-13732	365	22	.	.	PUNCT
fumecheng-13732	366	1	secondly	secondly	ADV
fumecheng-13732	366	2	,	,	PUNCT
fumecheng-13732	366	3	this	this	DET
fumecheng-13732	366	4	specific	specific	ADJ
fumecheng-13732	366	5	demonstration	demonstration	NOUN
fumecheng-13732	366	6	validates	validate	VERB
fumecheng-13732	366	7	the	the	DET
fumecheng-13732	366	8	potential	potential	NOUN
fumecheng-13732	366	9	of	of	ADP
fumecheng-13732	366	10	the	the	DET
fumecheng-13732	366	11	new	new	ADJ
fumecheng-13732	366	12	variational	variational	ADJ
fumecheng-13732	366	13	principle	principle	NOUN
fumecheng-13732	366	14	for	for	ADP
fumecheng-13732	366	15	future	future	ADJ
fumecheng-13732	366	16	research	research	NOUN
fumecheng-13732	366	17	.	.	PUNCT
fumecheng-13732	367	1	it	it	PRON
fumecheng-13732	367	2	serves	serve	VERB
fumecheng-13732	367	3	as	as	ADP
fumecheng-13732	367	4	a	a	DET
fumecheng-13732	367	5	foundation	foundation	NOUN
fumecheng-13732	367	6	for	for	ADP
fumecheng-13732	367	7	further	further	ADJ
fumecheng-13732	367	8	refinement	refinement	NOUN
fumecheng-13732	367	9	,	,	PUNCT
fumecheng-13732	367	10	potentially	potentially	ADV
fumecheng-13732	367	11	leading	lead	VERB
fumecheng-13732	367	12	to	to	ADP
fumecheng-13732	367	13	more	more	ADV
fumecheng-13732	367	14	inventive	inventive	ADJ
fumecheng-13732	367	15	and	and	CCONJ
fumecheng-13732	367	16	dependable	dependable	ADJ
fumecheng-13732	367	17	mems	mem	NOUN
fumecheng-13732	367	18	designs	design	NOUN
fumecheng-13732	367	19	,	,	PUNCT
fumecheng-13732	367	20	particularly	particularly	ADV
fumecheng-13732	367	21	for	for	ADP
fumecheng-13732	367	22	wearable	wearable	ADJ
fumecheng-13732	367	23	technologies	technology	NOUN
fumecheng-13732	367	24	where	where	SCONJ
fumecheng-13732	367	25	robustness	robustness	NOUN
fumecheng-13732	367	26	and	and	CCONJ
fumecheng-13732	367	27	miniaturization	miniaturization	NOUN
fumecheng-13732	367	28	are	be	AUX
fumecheng-13732	367	29	paramount	paramount	ADJ
fumecheng-13732	367	30	.	.	PUNCT
fumecheng-13732	368	1	it	it	PRON
fumecheng-13732	368	2	also	also	ADV
fumecheng-13732	368	3	opens	open	VERB
fumecheng-13732	368	4	avenues	avenue	NOUN
fumecheng-13732	368	5	for	for	ADP
fumecheng-13732	368	6	deeper	deep	ADJ
fumecheng-13732	368	7	investigations	investigation	NOUN
fumecheng-13732	368	8	into	into	ADP
fumecheng-13732	368	9	the	the	DET
fumecheng-13732	368	10	relationship	relationship	NOUN
fumecheng-13732	368	11	between	between	ADP
fumecheng-13732	368	12	variational	variational	ADJ
fumecheng-13732	368	13	principles	principle	NOUN
fumecheng-13732	368	14	and	and	CCONJ
fumecheng-13732	368	15	microscale	microscale	ADJ
fumecheng-13732	368	16	electromechanical	electromechanical	ADJ
fumecheng-13732	368	17	performance	performance	NOUN
fumecheng-13732	368	18	.	.	PUNCT
fumecheng-13732	369	1	finally	finally	ADV
fumecheng-13732	369	2	,	,	PUNCT
fumecheng-13732	369	3	the	the	DET
fumecheng-13732	369	4	application	application	NOUN
fumecheng-13732	369	5	of	of	ADP
fumecheng-13732	369	6	mems	mem	NOUN
fumecheng-13732	369	7	in	in	ADP
fumecheng-13732	369	8	wearable	wearable	ADJ
fumecheng-13732	369	9	textiles	textile	NOUN
fumecheng-13732	369	10	is	be	AUX
fumecheng-13732	369	11	reaffirmed	reaffirm	VERB
fumecheng-13732	369	12	as	as	ADP
fumecheng-13732	369	13	highly	highly	ADV
fumecheng-13732	369	14	promising	promising	ADJ
fumecheng-13732	369	15	.	.	PUNCT
fumecheng-13732	370	1	the	the	DET
fumecheng-13732	370	2	specific	specific	ADJ
fumecheng-13732	370	3	mems	mem	NOUN
fumecheng-13732	370	4	pressure	pressure	NOUN
fumecheng-13732	370	5	sensor	sensor	NOUN
fumecheng-13732	370	6	case	case	NOUN
fumecheng-13732	370	7	demonstrates	demonstrate	VERB
fumecheng-13732	370	8	that	that	SCONJ
fumecheng-13732	370	9	our	our	PRON
fumecheng-13732	370	10	variational	variational	ADJ
fumecheng-13732	370	11	approach	approach	NOUN
fumecheng-13732	370	12	not	not	PART
fumecheng-13732	370	13	only	only	ADV
fumecheng-13732	370	14	improves	improve	VERB
fumecheng-13732	370	15	design	design	NOUN
fumecheng-13732	370	16	efficiency	efficiency	NOUN
fumecheng-13732	370	17	,	,	PUNCT
fumecheng-13732	370	18	but	but	CCONJ
fumecheng-13732	370	19	also	also	ADV
fumecheng-13732	370	20	enhances	enhance	VERB
fumecheng-13732	370	21	the	the	DET
fumecheng-13732	370	22	reliability	reliability	NOUN
fumecheng-13732	370	23	of	of	ADP
fumecheng-13732	370	24	wearable	wearable	ADJ
fumecheng-13732	370	25	systems	system	NOUN
fumecheng-13732	370	26	.	.	PUNCT
fumecheng-13732	371	1	in	in	ADP
fumecheng-13732	371	2	summary	summary	NOUN
fumecheng-13732	371	3	,	,	PUNCT
fumecheng-13732	371	4	the	the	DET
fumecheng-13732	371	5	proposed	propose	VERB
fumecheng-13732	371	6	variational	variational	ADJ
fumecheng-13732	371	7	principle	principle	NOUN
fumecheng-13732	371	8	,	,	PUNCT
fumecheng-13732	371	9	validated	validate	VERB
fumecheng-13732	371	10	through	through	ADP
fumecheng-13732	371	11	the	the	DET
fumecheng-13732	371	12	mems	mem	NOUN
fumecheng-13732	371	13	pressure	pressure	NOUN
fumecheng-13732	371	14	sensor	sensor	NOUN
fumecheng-13732	371	15	in	in	ADP
fumecheng-13732	371	16	wearable	wearable	ADJ
fumecheng-13732	371	17	textiles	textile	NOUN
fumecheng-13732	371	18	,	,	PUNCT
fumecheng-13732	371	19	advances	advance	VERB
fumecheng-13732	371	20	both	both	CCONJ
fumecheng-13732	371	21	theoretical	theoretical	ADJ
fumecheng-13732	371	22	modeling	modeling	NOUN
fumecheng-13732	371	23	and	and	CCONJ
fumecheng-13732	371	24	practical	practical	ADJ
fumecheng-13732	371	25	design	design	NOUN
fumecheng-13732	371	26	of	of	ADP
fumecheng-13732	371	27	mems	mem	NOUN
fumecheng-13732	371	28	,	,	PUNCT
fumecheng-13732	371	29	paving	pave	VERB
fumecheng-13732	371	30	the	the	DET
fumecheng-13732	371	31	way	way	NOUN
fumecheng-13732	371	32	for	for	ADP
fumecheng-13732	371	33	more	more	ADV
fumecheng-13732	371	34	robust	robust	ADJ
fumecheng-13732	371	35	and	and	CCONJ
fumecheng-13732	371	36	versatile	versatile	ADJ
fumecheng-13732	371	37	microscale	microscale	ADJ
fumecheng-13732	371	38	devices	device	NOUN
fumecheng-13732	371	39	in	in	ADP
fumecheng-13732	371	40	emerging	emerge	VERB
fumecheng-13732	371	41	applications	application	NOUN
fumecheng-13732	371	42	.	.	PUNCT
fumecheng-13732	372	1	specifically	specifically	ADV
fumecheng-13732	372	2	,	,	PUNCT
fumecheng-13732	372	3	the	the	DET
fumecheng-13732	372	4	modeling	modeling	NOUN
fumecheng-13732	372	5	framework	framework	NOUN
fumecheng-13732	372	6	and	and	CCONJ
fumecheng-13732	372	7	analytical	analytical	ADJ
fumecheng-13732	372	8	approach	approach	NOUN
fumecheng-13732	372	9	presented	present	VERB
fumecheng-13732	372	10	herein	herein	NOUN
fumecheng-13732	372	11	can	can	AUX
fumecheng-13732	372	12	be	be	AUX
fumecheng-13732	372	13	further	far	ADV
fumecheng-13732	372	14	extended	extend	VERB
fumecheng-13732	372	15	to	to	ADP
fumecheng-13732	372	16	the	the	DET
fumecheng-13732	372	17	study	study	NOUN
fumecheng-13732	372	18	of	of	ADP
fumecheng-13732	372	19	mems	mem	NOUN
fumecheng-13732	372	20	graphene	graphene	NOUN
fumecheng-13732	372	21	resonators	resonator	NOUN
fumecheng-13732	372	22	[	[	X
fumecheng-13732	372	23	50	50	NUM
fumecheng-13732	372	24	]	]	PUNCT
fumecheng-13732	372	25	,	,	PUNCT
fumecheng-13732	372	26	where	where	SCONJ
fumecheng-13732	372	27	precise	precise	ADJ
fumecheng-13732	372	28	characterization	characterization	NOUN
fumecheng-13732	372	29	of	of	ADP
fumecheng-13732	372	30	dynamic	dynamic	ADJ
fumecheng-13732	372	31	behaviors	behavior	NOUN
fumecheng-13732	372	32	and	and	CCONJ
fumecheng-13732	372	33	instability	instability	NOUN
fumecheng-13732	372	34	thresholds	threshold	NOUN
fumecheng-13732	372	35	is	be	AUX
fumecheng-13732	372	36	equally	equally	ADV
fumecheng-13732	372	37	critical	critical	ADJ
fumecheng-13732	372	38	for	for	ADP
fumecheng-13732	372	39	optimizing	optimize	VERB
fumecheng-13732	372	40	performance	performance	NOUN
fumecheng-13732	372	41	in	in	ADP
fumecheng-13732	372	42	high	high	ADJ
fumecheng-13732	372	43	-	-	PUNCT
fumecheng-13732	372	44	frequency	frequency	NOUN
fumecheng-13732	372	45	communication	communication	NOUN
fumecheng-13732	372	46	and	and	CCONJ
fumecheng-13732	372	47	sensing	sense	VERB
fumecheng-13732	372	48	scenarios	scenario	NOUN
fumecheng-13732	372	49	.	.	PUNCT
fumecheng-13732	373	1	this	this	DET
fumecheng-13732	373	2	cross	cross	ADJ
fumecheng-13732	373	3	-	-	ADJ
fumecheng-13732	373	4	application	application	ADJ
fumecheng-13732	373	5	potential	potential	NOUN
fumecheng-13732	373	6	underscores	underscore	VERB
fumecheng-13732	373	7	the	the	DET
fumecheng-13732	373	8	generalizability	generalizability	NOUN
fumecheng-13732	373	9	of	of	ADP
fumecheng-13732	373	10	our	our	PRON
fumecheng-13732	373	11	variational	variational	ADJ
fumecheng-13732	373	12	principle	principle	NOUN
fumecheng-13732	373	13	in	in	ADP
fumecheng-13732	373	14	addressing	address	VERB
fumecheng-13732	373	15	the	the	DET
fumecheng-13732	373	16	core	core	ADJ
fumecheng-13732	373	17	challenges	challenge	NOUN
fumecheng-13732	373	18	of	of	ADP
fumecheng-13732	373	19	diverse	diverse	ADJ
fumecheng-13732	373	20	mems	mem	NOUN
fumecheng-13732	373	21	configurations	configuration	NOUN
fumecheng-13732	373	22	.	.	PUNCT
fumecheng-13732	374	1	acknowledgement	acknowledgement	NOUN
fumecheng-13732	374	2	:	:	PUNCT
fumecheng-13732	374	3	the	the	DET
fumecheng-13732	374	4	work	work	NOUN
fumecheng-13732	374	5	is	be	AUX
fumecheng-13732	374	6	supported	support	VERB
fumecheng-13732	374	7	by	by	ADP
fumecheng-13732	374	8	guangdong	guangdong	PROPN
fumecheng-13732	374	9	basic	basic	ADJ
fumecheng-13732	374	10	and	and	CCONJ
fumecheng-13732	374	11	applied	apply	VERB
fumecheng-13732	374	12	basic	basic	ADJ
fumecheng-13732	374	13	research	research	NOUN
fumecheng-13732	374	14	foundation	foundation	NOUN
fumecheng-13732	374	15	(	(	PUNCT
fumecheng-13732	374	16	no.2022a1515111135	no.2022a1515111135	PROPN
fumecheng-13732	374	17	&	&	CCONJ
fumecheng-13732	374	18	no.2025a1515010407	no.2025a1515010407	PROPN
fumecheng-13732	374	19	)	)	PUNCT
fumecheng-13732	374	20	.	.	PUNCT
fumecheng-13732	375	1	references	reference	NOUN
fumecheng-13732	375	2	1	1	NUM
fumecheng-13732	375	3	.	.	X
fumecheng-13732	375	4	tang	tang	PROPN
fumecheng-13732	375	5	,	,	PUNCT
fumecheng-13732	375	6	h.	h.	PROPN
fumecheng-13732	375	7	n.	n.	PROPN
fumecheng-13732	375	8	,	,	PUNCT
fumecheng-13732	375	9	wang	wang	PROPN
fumecheng-13732	375	10	,	,	PUNCT
fumecheng-13732	375	11	y.	y.	PROPN
fumecheng-13732	375	12	t.	t.	PROPN
fumecheng-13732	375	13	,	,	PUNCT
fumecheng-13732	375	14	ni	ni	PROPN
fumecheng-13732	375	15	,	,	PUNCT
fumecheng-13732	375	16	x.	x.	PROPN
fumecheng-13732	375	17	q.	q.	PROPN
fumecheng-13732	375	18	,	,	PUNCT
fumecheng-13732	375	19	watanabe	watanabe	PROPN
fumecheng-13732	375	20	,	,	PUNCT
fumecheng-13732	375	21	k.	k.	PROPN
fumecheng-13732	375	22	,	,	PUNCT
fumecheng-13732	375	23	taniguchi	taniguchi	PROPN
fumecheng-13732	375	24	,	,	PUNCT
fumecheng-13732	375	25	t.	t.	PROPN
fumecheng-13732	375	26	,	,	PUNCT
fumecheng-13732	375	27	jarillo	jarillo	PROPN
fumecheng-13732	375	28	-	-	PUNCT
fumecheng-13732	375	29	herrero	herrero	NOUN
fumecheng-13732	375	30	,	,	PUNCT
fumecheng-13732	375	31	p.	p.	PROPN
fumecheng-13732	375	32	,	,	PUNCT
fumecheng-13732	375	33	fan	fan	PROPN
fumecheng-13732	375	34	,	,	PUNCT
fumecheng-13732	375	35	s.	s.	PROPN
fumecheng-13732	375	36	h.	h.	PROPN
fumecheng-13732	375	37	,	,	PUNCT
fumecheng-13732	375	38	mazur	mazur	PROPN
fumecheng-13732	375	39	,	,	PUNCT
fumecheng-13732	375	40	e.	e.	PROPN
fumecheng-13732	375	41	,	,	PUNCT
fumecheng-13732	375	42	yacoby	yacoby	PROPN
fumecheng-13732	375	43	,	,	PUNCT
fumecheng-13732	375	44	a.	a.	NOUN
fumecheng-13732	375	45	,	,	PUNCT
fumecheng-13732	375	46	cao	cao	PROPN
fumecheng-13732	375	47	,	,	PUNCT
fumecheng-13732	375	48	y.	y.	NOUN
fumecheng-13732	375	49	,	,	PUNCT
fumecheng-13732	375	50	2024	2024	NUM
fumecheng-13732	375	51	,	,	PUNCT
fumecheng-13732	375	52	on	on	ADP
fumecheng-13732	375	53	-	-	PUNCT
fumecheng-13732	375	54	chip	chip	NOUN
fumecheng-13732	375	55	multi	multi	ADJ
fumecheng-13732	375	56	-	-	NOUN
fumecheng-13732	375	57	degree	degree	NOUN
fumecheng-13732	375	58	-	-	PUNCT
fumecheng-13732	375	59	of	of	ADP
fumecheng-13732	375	60	-	-	PUNCT
fumecheng-13732	375	61	freedom	freedom	NOUN
fumecheng-13732	375	62	control	control	NOUN
fumecheng-13732	375	63	of	of	ADP
fumecheng-13732	375	64	two	two	NUM
fumecheng-13732	375	65	-	-	PUNCT
fumecheng-13732	375	66	dimensional	dimensional	ADJ
fumecheng-13732	375	67	materials	material	NOUN
fumecheng-13732	375	68	,	,	PUNCT
fumecheng-13732	375	69	nature	nature	NOUN
fumecheng-13732	375	70	,	,	PUNCT
fumecheng-13732	375	71	632(8027	632(8027	NUM
fumecheng-13732	375	72	)	)	PUNCT
fumecheng-13732	375	73	,	,	PUNCT
fumecheng-13732	375	74	pp	pp	ADP
fumecheng-13732	375	75	.	.	PUNCT
fumecheng-13732	376	1	1038	1038	NUM
fumecheng-13732	376	2	-	-	SYM
fumecheng-13732	376	3	1044	1044	NUM
fumecheng-13732	376	4	.	.	PUNCT
fumecheng-13732	377	1	2	2	NUM
fumecheng-13732	377	2	.	.	X
fumecheng-13732	377	3	kolluri	kolluri	PROPN
fumecheng-13732	377	4	,	,	PUNCT
fumecheng-13732	377	5	s.	s.	PROPN
fumecheng-13732	377	6	s.	s.	PROPN
fumecheng-13732	377	7	k.	k.	PROPN
fumecheng-13732	377	8	,	,	PUNCT
fumecheng-13732	377	9	durai	durai	PROPN
fumecheng-13732	377	10	,	,	PUNCT
fumecheng-13732	377	11	s.	s.	PROPN
fumecheng-13732	377	12	a.	a.	PROPN
fumecheng-13732	377	13	,	,	PUNCT
fumecheng-13732	377	14	2024	2024	NUM
fumecheng-13732	377	15	,	,	PUNCT
fumecheng-13732	377	16	wearable	wearable	ADJ
fumecheng-13732	377	17	micro	micro	NOUN
fumecheng-13732	377	18	-	-	ADJ
fumecheng-13732	377	19	electro	electro	ADJ
fumecheng-13732	377	20	-	-	PUNCT
fumecheng-13732	377	21	mechanical	mechanical	ADJ
fumecheng-13732	377	22	systems	system	NOUN
fumecheng-13732	377	23	pressure	pressure	NOUN
fumecheng-13732	377	24	sensors	sensor	NOUN
fumecheng-13732	377	25	in	in	ADP
fumecheng-13732	377	26	health	health	NOUN
fumecheng-13732	377	27	care	care	NOUN
fumecheng-13732	377	28	:	:	PUNCT
fumecheng-13732	377	29	advancements	advancement	NOUN
fumecheng-13732	377	30	and	and	CCONJ
fumecheng-13732	377	31	trends	trend	NOUN
fumecheng-13732	377	32	—	—	PUNCT
fumecheng-13732	377	33	a	a	DET
fumecheng-13732	377	34	review	review	NOUN
fumecheng-13732	377	35	,	,	PUNCT
fumecheng-13732	377	36	iet	iet	PROPN
fumecheng-13732	377	37	wireless	wireless	PROPN
fumecheng-13732	377	38	sensor	sensor	NOUN
fumecheng-13732	377	39	systems	system	NOUN
fumecheng-13732	377	40	,	,	PUNCT
fumecheng-13732	377	41	14(6	14(6	NOUN
fumecheng-13732	377	42	)	)	PUNCT
fumecheng-13732	377	43	,	,	PUNCT
fumecheng-13732	377	44	pp	pp	ADJ
fumecheng-13732	377	45	.	.	PUNCT
fumecheng-13732	378	1	233–247	233–247	NUM
fumecheng-13732	378	2	.	.	PUNCT
fumecheng-13732	379	1	3	3	X
fumecheng-13732	379	2	.	.	X
fumecheng-13732	379	3	grayson	grayson	PROPN
fumecheng-13732	379	4	,	,	PUNCT
fumecheng-13732	379	5	a.	a.	PROPN
fumecheng-13732	379	6	c.	c.	PROPN
fumecheng-13732	379	7	r.	r.	PROPN
fumecheng-13732	379	8	,	,	PUNCT
fumecheng-13732	379	9	shawgo	shawgo	PROPN
fumecheng-13732	379	10	,	,	PUNCT
fumecheng-13732	379	11	r.	r.	PROPN
fumecheng-13732	379	12	s.	s.	PROPN
fumecheng-13732	379	13	,	,	PUNCT
fumecheng-13732	379	14	li	li	PROPN
fumecheng-13732	379	15	,	,	PUNCT
fumecheng-13732	379	16	y.	y.	PROPN
fumecheng-13732	379	17	w.	w.	PROPN
fumecheng-13732	379	18	,	,	PUNCT
fumecheng-13732	379	19	cima	cima	PROPN
fumecheng-13732	379	20	,	,	PUNCT
fumecheng-13732	379	21	m.	m.	PROPN
fumecheng-13732	379	22	j.	j.	PROPN
fumecheng-13732	379	23	,	,	PUNCT
fumecheng-13732	379	24	2004	2004	NUM
fumecheng-13732	379	25	,	,	PUNCT
fumecheng-13732	379	26	electronic	electronic	ADJ
fumecheng-13732	379	27	mems	mem	NOUN
fumecheng-13732	379	28	for	for	ADP
fumecheng-13732	379	29	triggered	trigger	VERB
fumecheng-13732	379	30	delivery	delivery	NOUN
fumecheng-13732	379	31	,	,	PUNCT
fumecheng-13732	379	32	advanced	advanced	ADJ
fumecheng-13732	379	33	drug	drug	NOUN
fumecheng-13732	379	34	delivery	delivery	NOUN
fumecheng-13732	379	35	reviews	review	NOUN
fumecheng-13732	379	36	,	,	PUNCT
fumecheng-13732	379	37	56(2	56(2	ADJ
fumecheng-13732	379	38	)	)	PUNCT
fumecheng-13732	379	39	,	,	PUNCT
fumecheng-13732	379	40	pp	pp	ADJ
fumecheng-13732	379	41	.	.	PUNCT
fumecheng-13732	380	1	173–184	173–184	NUM
fumecheng-13732	380	2	.	.	NOUN
fumecheng-13732	380	3	4	4	NUM
fumecheng-13732	380	4	.	.	X
fumecheng-13732	380	5	aghajanloo	aghajanloo	ADJ
fumecheng-13732	380	6	,	,	PUNCT
fumecheng-13732	380	7	b.	b.	PROPN
fumecheng-13732	380	8	,	,	PUNCT
fumecheng-13732	380	9	nazarnezhad	nazarnezhad	PROPN
fumecheng-13732	380	10	,	,	PUNCT
fumecheng-13732	380	11	s.	s.	PROPN
fumecheng-13732	380	12	,	,	PUNCT
fumecheng-13732	380	13	arshadi	arshadi	PROPN
fumecheng-13732	380	14	,	,	PUNCT
fumecheng-13732	380	15	f.	f.	PROPN
fumecheng-13732	380	16	,	,	PUNCT
fumecheng-13732	380	17	kottapalli	kottapalli	PROPN
fumecheng-13732	380	18	,	,	PUNCT
fumecheng-13732	380	19	a.	a.	PROPN
fumecheng-13732	380	20	g.	g.	PROPN
fumecheng-13732	380	21	p.	p.	PROPN
fumecheng-13732	380	22	,	,	PUNCT
fumecheng-13732	380	23	pastras	pastras	PROPN
fumecheng-13732	380	24	,	,	PUNCT
fumecheng-13732	380	25	c.	c.	PROPN
fumecheng-13732	380	26	,	,	PUNCT
fumecheng-13732	380	27	asadnia	asadnia	PROPN
fumecheng-13732	380	28	,	,	PUNCT
fumecheng-13732	380	29	m.	m.	NOUN
fumecheng-13732	380	30	,	,	PUNCT
fumecheng-13732	380	31	2025	2025	NUM
fumecheng-13732	380	32	,	,	PUNCT
fumecheng-13732	380	33	emerging	emerge	VERB
fumecheng-13732	380	34	trends	trend	NOUN
fumecheng-13732	380	35	in	in	ADP
fumecheng-13732	380	36	biosensor	biosensor	NOUN
fumecheng-13732	380	37	and	and	CCONJ
fumecheng-13732	380	38	microfluidics	microfluidic	NOUN
fumecheng-13732	380	39	integration	integration	NOUN
fumecheng-13732	380	40	for	for	ADP
fumecheng-13732	380	41	inner	inner	ADJ
fumecheng-13732	380	42	ear	ear	NOUN
fumecheng-13732	380	43	theragnostics	theragnostic	NOUN
fumecheng-13732	380	44	,	,	PUNCT
fumecheng-13732	380	45	biosensors	biosensor	NOUN
fumecheng-13732	380	46	&	&	CCONJ
fumecheng-13732	380	47	bioelectronics	bioelectronic	NOUN
fumecheng-13732	380	48	,	,	PUNCT
fumecheng-13732	380	49	286	286	NUM
fumecheng-13732	380	50	,	,	PUNCT
fumecheng-13732	380	51	117588	117588	NUM
fumecheng-13732	380	52	.	.	PUNCT
fumecheng-13732	381	1	5	5	X
fumecheng-13732	381	2	.	.	X
fumecheng-13732	381	3	iannacci	iannacci	PROPN
fumecheng-13732	381	4	,	,	PUNCT
fumecheng-13732	381	5	j.	j.	PROPN
fumecheng-13732	381	6	,	,	PUNCT
fumecheng-13732	381	7	tagliapietra	tagliapietra	PROPN
fumecheng-13732	381	8	,	,	PUNCT
fumecheng-13732	381	9	g.	g.	PROPN
fumecheng-13732	381	10	,	,	PUNCT
fumecheng-13732	381	11	2025	2025	NUM
fumecheng-13732	381	12	,	,	PUNCT
fumecheng-13732	381	13	rf	rf	NOUN
fumecheng-13732	381	14	-	-	PUNCT
fumecheng-13732	381	15	mems	mem	NOUN
fumecheng-13732	381	16	as	as	ADP
fumecheng-13732	381	17	a	a	DET
fumecheng-13732	381	18	key	key	ADJ
fumecheng-13732	381	19	enabling	enable	VERB
fumecheng-13732	381	20	technology	technology	NOUN
fumecheng-13732	381	21	in	in	ADP
fumecheng-13732	381	22	the	the	DET
fumecheng-13732	381	23	road	road	NOUN
fumecheng-13732	381	24	to	to	ADP
fumecheng-13732	381	25	6	6	NUM
fumecheng-13732	381	26	g	g	NOUN
fumecheng-13732	381	27	,	,	PUNCT
fumecheng-13732	381	28	future	future	ADJ
fumecheng-13732	381	29	networks	network	NOUN
fumecheng-13732	381	30	and	and	CCONJ
fumecheng-13732	381	31	tactile	tactile	ADJ
fumecheng-13732	381	32	internet	internet	NOUN
fumecheng-13732	381	33	,	,	PUNCT
fumecheng-13732	381	34	lecture	lecture	NOUN
fumecheng-13732	381	35	notes	note	NOUN
fumecheng-13732	381	36	in	in	ADP
fumecheng-13732	381	37	electrical	electrical	ADJ
fumecheng-13732	381	38	engineering	engineering	NOUN
fumecheng-13732	381	39	.	.	PUNCT
fumecheng-13732	381	40	,	,	PUNCT
fumecheng-13732	381	41	1334	1334	NUM
fumecheng-13732	381	42	,	,	PUNCT
fumecheng-13732	381	43	pp	pp	ADJ
fumecheng-13732	381	44	.	.	PUNCT
fumecheng-13732	382	1	168–175	168–175	NUM
fumecheng-13732	382	2	.	.	NOUN
fumecheng-13732	383	1	6	6	NUM
fumecheng-13732	383	2	.	.	X
fumecheng-13732	383	3	roy	roy	PROPN
fumecheng-13732	383	4	,	,	PUNCT
fumecheng-13732	383	5	k.	k.	PROPN
fumecheng-13732	383	6	,	,	PUNCT
fumecheng-13732	383	7	sim	sim	PROPN
fumecheng-13732	383	8	,	,	PUNCT
fumecheng-13732	383	9	d.	d.	PROPN
fumecheng-13732	383	10	,	,	PUNCT
fumecheng-13732	383	11	wang	wang	PROPN
fumecheng-13732	383	12	,	,	PUNCT
fumecheng-13732	383	13	l.	l.	PROPN
fumecheng-13732	383	14	w.	w.	PROPN
fumecheng-13732	383	15	,	,	PUNCT
fumecheng-13732	383	16	zhang	zhang	PROPN
fumecheng-13732	383	17	,	,	PUNCT
fumecheng-13732	383	18	z.	z.	PROPN
fumecheng-13732	383	19	x.	x.	PROPN
fumecheng-13732	383	20	,	,	PUNCT
fumecheng-13732	383	21	guo	guo	PROPN
fumecheng-13732	383	22	,	,	PUNCT
fumecheng-13732	383	23	x.	x.	PROPN
fumecheng-13732	383	24	e.	e.	PROPN
fumecheng-13732	383	25	,	,	PUNCT
fumecheng-13732	383	26	zhu	zhu	PROPN
fumecheng-13732	383	27	,	,	PUNCT
fumecheng-13732	383	28	y.	y.	PROPN
fumecheng-13732	383	29	,	,	PUNCT
fumecheng-13732	383	30	swarup	swarup	PROPN
fumecheng-13732	383	31	,	,	PUNCT
fumecheng-13732	383	32	s.	s.	PROPN
fumecheng-13732	383	33	,	,	PUNCT
fumecheng-13732	383	34	lee	lee	PROPN
fumecheng-13732	383	35	,	,	PUNCT
fumecheng-13732	383	36	c.	c.	PROPN
fumecheng-13732	383	37	,	,	PUNCT
fumecheng-13732	383	38	2025	2025	NUM
fumecheng-13732	383	39	,	,	PUNCT
fumecheng-13732	383	40	a	a	DET
fumecheng-13732	383	41	generative	generative	ADJ
fumecheng-13732	383	42	aiassisted	aiassiste	VERB
fumecheng-13732	383	43	piezo	piezo	ADJ
fumecheng-13732	383	44	-	-	ADJ
fumecheng-13732	383	45	mems	mems	ADJ
fumecheng-13732	383	46	ultrasound	ultrasound	NOUN
fumecheng-13732	383	47	device	device	NOUN
fumecheng-13732	383	48	for	for	ADP
fumecheng-13732	383	49	plant	plant	NOUN
fumecheng-13732	383	50	dehydration	dehydration	NOUN
fumecheng-13732	383	51	monitoring	monitoring	NOUN
fumecheng-13732	383	52	,	,	PUNCT
fumecheng-13732	383	53	advanced	advanced	ADJ
fumecheng-13732	383	54	science	science	NOUN
fumecheng-13732	383	55	,	,	PUNCT
fumecheng-13732	383	56	doi	doi	NOUN
fumecheng-13732	383	57	:	:	PUNCT
fumecheng-13732	383	58	10.1002	10.1002	NUM
fumecheng-13732	383	59	/	/	SYM
fumecheng-13732	383	60	advs.202504954	advs.202504954	NOUN
fumecheng-13732	383	61	.	.	NOUN
fumecheng-13732	383	62	7	7	NUM
fumecheng-13732	383	63	.	.	X
fumecheng-13732	384	1	liang	liang	PROPN
fumecheng-13732	384	2	,	,	PUNCT
fumecheng-13732	384	3	y.	y.	PROPN
fumecheng-13732	384	4	h.	h.	PROPN
fumecheng-13732	384	5	,	,	PUNCT
fumecheng-13732	384	6	lin	lin	PROPN
fumecheng-13732	384	7	,	,	PUNCT
fumecheng-13732	384	8	y.	y.	PROPN
fumecheng-13732	384	9	s.	s.	PROPN
fumecheng-13732	384	10	,	,	PUNCT
fumecheng-13732	384	11	2025	2025	NUM
fumecheng-13732	384	12	,	,	PUNCT
fumecheng-13732	384	13	mems	mem	NOUN
fumecheng-13732	384	14	electrothermal	electrothermal	ADJ
fumecheng-13732	384	15	actuator	actuator	NOUN
fumecheng-13732	384	16	with	with	ADP
fumecheng-13732	384	17	highly	highly	ADV
fumecheng-13732	384	18	linear	linear	ADJ
fumecheng-13732	384	19	actuation	actuation	NOUN
fumecheng-13732	384	20	and	and	CCONJ
fumecheng-13732	384	21	stable	stable	ADJ
fumecheng-13732	384	22	characteristics	characteristic	NOUN
fumecheng-13732	384	23	,	,	PUNCT
fumecheng-13732	384	24	materials	material	NOUN
fumecheng-13732	384	25	chemistry	chemistry	NOUN
fumecheng-13732	384	26	and	and	CCONJ
fumecheng-13732	384	27	physics	physics	NOUN
fumecheng-13732	384	28	,	,	PUNCT
fumecheng-13732	384	29	341	341	NUM
fumecheng-13732	384	30	,	,	PUNCT
fumecheng-13732	384	31	130967	130967	NUM
fumecheng-13732	384	32	.	.	PUNCT
fumecheng-13732	385	1	8	8	X
fumecheng-13732	385	2	.	.	X
fumecheng-13732	385	3	skrzypacz	skrzypacz	NOUN
fumecheng-13732	385	4	,	,	PUNCT
fumecheng-13732	385	5	p.	p.	PROPN
fumecheng-13732	385	6	s.	s.	PROPN
fumecheng-13732	385	7	,	,	PUNCT
fumecheng-13732	385	8	putek	putek	PROPN
fumecheng-13732	385	9	,	,	PUNCT
fumecheng-13732	385	10	p.	p.	NOUN
fumecheng-13732	385	11	a.	a.	NOUN
fumecheng-13732	385	12	,	,	PUNCT
fumecheng-13732	385	13	pruchnik	pruchnik	X
fumecheng-13732	385	14	,	,	PUNCT
fumecheng-13732	385	15	b.	b.	PROPN
fumecheng-13732	385	16	cz	cz	PROPN
fumecheng-13732	385	17	.	.	PROPN
fumecheng-13732	385	18	,	,	PUNCT
fumecheng-13732	385	19	turganov	turganov	NOUN
fumecheng-13732	385	20	,	,	PUNCT
fumecheng-13732	385	21	a.	a.	PROPN
fumecheng-13732	385	22	,	,	PUNCT
fumecheng-13732	385	23	ellis	ellis	PROPN
fumecheng-13732	385	24	,	,	PUNCT
fumecheng-13732	385	25	g.	g.	PROPN
fumecheng-13732	385	26	a.	a.	PROPN
fumecheng-13732	385	27	,	,	PUNCT
fumecheng-13732	385	28	gotszalk	gotszalk	NOUN
fumecheng-13732	385	29	,	,	PUNCT
fumecheng-13732	385	30	t.	t.	PROPN
fumecheng-13732	385	31	p.	p.	PROPN
fumecheng-13732	385	32	,	,	PUNCT
fumecheng-13732	385	33	2025	2025	NUM
fumecheng-13732	385	34	,	,	PUNCT
fumecheng-13732	385	35	analysis	analysis	NOUN
fumecheng-13732	385	36	of	of	ADP
fumecheng-13732	385	37	dynamic	dynamic	ADJ
fumecheng-13732	385	38	pull	pull	NOUN
fumecheng-13732	385	39	-	-	PUNCT
fumecheng-13732	385	40	in	in	NOUN
fumecheng-13732	385	41	for	for	ADP
fumecheng-13732	385	42	lumped	lump	VERB
fumecheng-13732	385	43	mems	mems	ADJ
fumecheng-13732	385	44	model	model	NOUN
fumecheng-13732	385	45	of	of	ADP
fumecheng-13732	385	46	atomic	atomic	ADJ
fumecheng-13732	385	47	force	force	NOUN
fumecheng-13732	385	48	microscope	microscope	NOUN
fumecheng-13732	385	49	with	with	ADP
fumecheng-13732	385	50	constant	constant	ADJ
fumecheng-13732	385	51	magnetic	magnetic	ADJ
fumecheng-13732	385	52	excitation	excitation	NOUN
fumecheng-13732	385	53	,	,	PUNCT
fumecheng-13732	385	54	journal	journal	NOUN
fumecheng-13732	385	55	of	of	ADP
fumecheng-13732	385	56	sound	sound	NOUN
fumecheng-13732	385	57	and	and	CCONJ
fumecheng-13732	385	58	vibration	vibration	NOUN
fumecheng-13732	385	59	,	,	PUNCT
fumecheng-13732	385	60	617	617	NUM
fumecheng-13732	385	61	,	,	PUNCT
fumecheng-13732	385	62	119215	119215	NUM
fumecheng-13732	385	63	.	.	PUNCT
fumecheng-13732	386	1	9	9	X
fumecheng-13732	386	2	.	.	X
fumecheng-13732	386	3	caddemi	caddemi	PROPN
fumecheng-13732	386	4	,	,	PUNCT
fumecheng-13732	386	5	s.	s.	PROPN
fumecheng-13732	386	6	,	,	PUNCT
fumecheng-13732	386	7	di	di	PROPN
fumecheng-13732	386	8	-	-	PUNCT
fumecheng-13732	386	9	paola	paola	PROPN
fumecheng-13732	386	10	,	,	PUNCT
fumecheng-13732	386	11	m.	m.	NOUN
fumecheng-13732	386	12	,	,	PUNCT
fumecheng-13732	386	13	2008	2008	NUM
fumecheng-13732	386	14	,	,	PUNCT
fumecheng-13732	386	15	the	the	DET
fumecheng-13732	386	16	hu	hu	PROPN
fumecheng-13732	386	17	-	-	ADJ
fumecheng-13732	386	18	washizu	washizu	ADJ
fumecheng-13732	386	19	variational	variational	ADJ
fumecheng-13732	386	20	principle	principle	NOUN
fumecheng-13732	386	21	for	for	ADP
fumecheng-13732	386	22	the	the	DET
fumecheng-13732	386	23	identification	identification	NOUN
fumecheng-13732	386	24	of	of	ADP
fumecheng-13732	386	25	imperfections	imperfection	NOUN
fumecheng-13732	386	26	in	in	ADP
fumecheng-13732	386	27	beams	beam	NOUN
fumecheng-13732	386	28	,	,	PUNCT
fumecheng-13732	386	29	international	international	ADJ
fumecheng-13732	386	30	journal	journal	NOUN
fumecheng-13732	386	31	for	for	ADP
fumecheng-13732	386	32	numerical	numerical	ADJ
fumecheng-13732	386	33	methods	method	NOUN
fumecheng-13732	386	34	in	in	ADP
fumecheng-13732	386	35	engineering	engineering	NOUN
fumecheng-13732	386	36	,	,	PUNCT
fumecheng-13732	386	37	75(11	75(11	NUM
fumecheng-13732	386	38	)	)	PUNCT
fumecheng-13732	386	39	,	,	PUNCT
fumecheng-13732	386	40	pp	pp	ADP
fumecheng-13732	386	41	.	.	PUNCT
fumecheng-13732	386	42	1259	1259	NUM
fumecheng-13732	386	43	-	-	SYM
fumecheng-13732	386	44	1281	1281	NUM
fumecheng-13732	386	45	.	.	PUNCT
fumecheng-13732	387	1	10	10	NUM
fumecheng-13732	387	2	.	.	X
fumecheng-13732	388	1	tian	tian	ADJ
fumecheng-13732	388	2	,	,	PUNCT
fumecheng-13732	388	3	y.	y.	PROPN
fumecheng-13732	388	4	,	,	PUNCT
fumecheng-13732	388	5	shao	shao	PROPN
fumecheng-13732	388	6	,	,	PUNCT
fumecheng-13732	388	7	y.	y.	PROPN
fumecheng-13732	388	8	b.	b.	PROPN
fumecheng-13732	388	9	,	,	PUNCT
fumecheng-13732	388	10	2024	2024	NUM
fumecheng-13732	388	11	,	,	PUNCT
fumecheng-13732	388	12	mini	mini	NOUN
fumecheng-13732	388	13	-	-	NOUN
fumecheng-13732	388	14	review	review	NOUN
fumecheng-13732	388	15	on	on	ADP
fumecheng-13732	388	16	periodic	periodic	ADJ
fumecheng-13732	388	17	properties	property	NOUN
fumecheng-13732	388	18	of	of	ADP
fumecheng-13732	388	19	mems	mem	NOUN
fumecheng-13732	388	20	oscillators	oscillator	NOUN
fumecheng-13732	388	21	,	,	PUNCT
fumecheng-13732	388	22	frontiers	frontier	NOUN
fumecheng-13732	388	23	in	in	ADP
fumecheng-13732	388	24	physics	physics	NOUN
fumecheng-13732	388	25	,	,	PUNCT
fumecheng-13732	388	26	12	12	NUM
fumecheng-13732	388	27	,	,	PUNCT
fumecheng-13732	388	28	1498185	1498185	NUM
fumecheng-13732	388	29	.	.	PUNCT
fumecheng-13732	389	1	664	664	NUM
fumecheng-13732	389	2	j.h	j.h	PROPN
fumecheng-13732	389	3	.	.	PUNCT
fumecheng-13732	390	1	he	he	PRON
fumecheng-13732	390	2	,	,	PUNCT
fumecheng-13732	390	3	j.	j.	PROPN
fumecheng-13732	390	4	ma	ma	PROPN
fumecheng-13732	390	5	,	,	PUNCT
fumecheng-13732	390	6	a.a	a.a	PROPN
fumecheng-13732	390	7	.	.	PROPN
fumecheng-13732	390	8	alsolam	alsolam	PROPN
fumecheng-13732	390	9	,	,	PUNCT
fumecheng-13732	390	10	c.h	c.h	PROPN
fumecheng-13732	390	11	.	.	PUNCT
fumecheng-13732	390	12	he	he	PRON
fumecheng-13732	390	13	11	11	NUM
fumecheng-13732	390	14	.	.	PUNCT
fumecheng-13732	391	1	rastegar	rastegar	PROPN
fumecheng-13732	391	2	,	,	PUNCT
fumecheng-13732	391	3	s.	s.	PROPN
fumecheng-13732	391	4	,	,	PUNCT
fumecheng-13732	391	5	ganji	ganji	PROPN
fumecheng-13732	391	6	,	,	PUNCT
fumecheng-13732	391	7	b.	b.	PROPN
fumecheng-13732	391	8	a.	a.	PROPN
fumecheng-13732	391	9	,	,	PUNCT
fumecheng-13732	391	10	varedi	varedi	PROPN
fumecheng-13732	391	11	,	,	PUNCT
fumecheng-13732	391	12	m.	m.	NOUN
fumecheng-13732	391	13	,	,	PUNCT
fumecheng-13732	391	14	erza	erza	PROPN
fumecheng-13732	391	15	,	,	PUNCT
fumecheng-13732	391	16	m.	m.	NOUN
fumecheng-13732	391	17	,	,	PUNCT
fumecheng-13732	391	18	2011	2011	NUM
fumecheng-13732	391	19	,	,	PUNCT
fumecheng-13732	391	20	application	application	NOUN
fumecheng-13732	391	21	of	of	ADP
fumecheng-13732	391	22	he	he	PRON
fumecheng-13732	391	23	's	's	PART
fumecheng-13732	391	24	variational	variational	ADJ
fumecheng-13732	391	25	iteration	iteration	NOUN
fumecheng-13732	391	26	method	method	NOUN
fumecheng-13732	391	27	to	to	ADP
fumecheng-13732	391	28	the	the	DET
fumecheng-13732	391	29	estimation	estimation	NOUN
fumecheng-13732	391	30	of	of	ADP
fumecheng-13732	391	31	diaphragm	diaphragm	NOUN
fumecheng-13732	391	32	deflection	deflection	NOUN
fumecheng-13732	391	33	in	in	ADP
fumecheng-13732	391	34	mems	mem	NOUN
fumecheng-13732	391	35	capacitive	capacitive	ADJ
fumecheng-13732	391	36	microphone	microphone	NOUN
fumecheng-13732	391	37	,	,	PUNCT
fumecheng-13732	391	38	measurement	measurement	NOUN
fumecheng-13732	391	39	,	,	PUNCT
fumecheng-13732	391	40	44(1	44(1	PROPN
fumecheng-13732	391	41	)	)	PUNCT
fumecheng-13732	391	42	,	,	PUNCT
fumecheng-13732	391	43	pp	pp	PROPN
fumecheng-13732	391	44	.	.	PUNCT
fumecheng-13732	392	1	113	113	NUM
fumecheng-13732	392	2	-	-	SYM
fumecheng-13732	392	3	120	120	NUM
fumecheng-13732	392	4	.	.	PUNCT
fumecheng-13732	393	1	12	12	NUM
fumecheng-13732	393	2	.	.	PUNCT
fumecheng-13732	394	1	wang	wang	PROPN
fumecheng-13732	394	2	,	,	PUNCT
fumecheng-13732	394	3	c.	c.	PROPN
fumecheng-13732	394	4	h.	h.	PROPN
fumecheng-13732	394	5	,	,	PUNCT
fumecheng-13732	394	6	meng	meng	PROPN
fumecheng-13732	394	7	,	,	PUNCT
fumecheng-13732	394	8	w.	w.	PROPN
fumecheng-13732	394	9	y.	y.	PROPN
fumecheng-13732	394	10	,	,	PUNCT
fumecheng-13732	394	11	2025	2025	NUM
fumecheng-13732	394	12	,	,	PUNCT
fumecheng-13732	394	13	research	research	NOUN
fumecheng-13732	394	14	on	on	ADP
fumecheng-13732	394	15	simulation	simulation	NOUN
fumecheng-13732	394	16	optimization	optimization	NOUN
fumecheng-13732	394	17	of	of	ADP
fumecheng-13732	394	18	mems	mem	NOUN
fumecheng-13732	394	19	microfluidic	microfluidic	ADJ
fumecheng-13732	394	20	structures	structure	NOUN
fumecheng-13732	394	21	at	at	ADP
fumecheng-13732	394	22	the	the	DET
fumecheng-13732	394	23	microscale	microscale	ADJ
fumecheng-13732	394	24	,	,	PUNCT
fumecheng-13732	394	25	micromachines	micromachine	NOUN
fumecheng-13732	394	26	,	,	PUNCT
fumecheng-13732	394	27	16(6	16(6	NUM
fumecheng-13732	394	28	)	)	PUNCT
fumecheng-13732	394	29	,	,	PUNCT
fumecheng-13732	394	30	695	695	NUM
fumecheng-13732	394	31	.	.	X
fumecheng-13732	394	32	13	13	NUM
fumecheng-13732	394	33	.	.	X
fumecheng-13732	394	34	skrzypacz	skrzypacz	NOUN
fumecheng-13732	394	35	,	,	PUNCT
fumecheng-13732	394	36	p.	p.	PROPN
fumecheng-13732	394	37	,	,	PUNCT
fumecheng-13732	394	38	ellis	ellis	PROPN
fumecheng-13732	394	39	,	,	PUNCT
fumecheng-13732	394	40	g.	g.	PROPN
fumecheng-13732	394	41	,	,	PUNCT
fumecheng-13732	394	42	pruchnik	pruchnik	X
fumecheng-13732	394	43	,	,	PUNCT
fumecheng-13732	394	44	b.	b.	PROPN
fumecheng-13732	394	45	,	,	PUNCT
fumecheng-13732	394	46	putek	putek	PROPN
fumecheng-13732	394	47	,	,	PUNCT
fumecheng-13732	394	48	p.	p.	NOUN
fumecheng-13732	394	49	,	,	PUNCT
fumecheng-13732	394	50	2025	2025	NUM
fumecheng-13732	394	51	,	,	PUNCT
fumecheng-13732	394	52	generalized	generalize	VERB
fumecheng-13732	394	53	analysis	analysis	NOUN
fumecheng-13732	394	54	of	of	ADP
fumecheng-13732	394	55	dynamic	dynamic	ADJ
fumecheng-13732	394	56	pull	pull	NOUN
fumecheng-13732	394	57	-	-	PUNCT
fumecheng-13732	394	58	in	in	NOUN
fumecheng-13732	394	59	for	for	ADP
fumecheng-13732	394	60	singular	singular	ADJ
fumecheng-13732	394	61	magmems	magmem	NOUN
fumecheng-13732	394	62	and	and	CCONJ
fumecheng-13732	394	63	mems	mem	NOUN
fumecheng-13732	394	64	oscillators	oscillator	NOUN
fumecheng-13732	394	65	,	,	PUNCT
fumecheng-13732	394	66	scientific	scientific	ADJ
fumecheng-13732	394	67	reports	report	NOUN
fumecheng-13732	394	68	15	15	NUM
fumecheng-13732	394	69	,	,	PUNCT
fumecheng-13732	394	70	23691	23691	NUM
fumecheng-13732	394	71	.	.	PUNCT
fumecheng-13732	395	1	14	14	NUM
fumecheng-13732	395	2	.	.	X
fumecheng-13732	395	3	deng	deng	PROPN
fumecheng-13732	395	4	,	,	PUNCT
fumecheng-13732	395	5	z.	z.	PROPN
fumecheng-13732	395	6	,	,	PUNCT
fumecheng-13732	395	7	lai	lai	PROPN
fumecheng-13732	395	8	,	,	PUNCT
fumecheng-13732	395	9	c.	c.	PROPN
fumecheng-13732	395	10	,	,	PUNCT
fumecheng-13732	395	11	zhou	zhou	PROPN
fumecheng-13732	395	12	,	,	PUNCT
fumecheng-13732	395	13	j.	j.	PROPN
fumecheng-13732	395	14	,	,	PUNCT
fumecheng-13732	395	15	wang	wang	PROPN
fumecheng-13732	395	16	,	,	PUNCT
fumecheng-13732	395	17	y.	y.	PROPN
fumecheng-13732	395	18	,	,	PUNCT
fumecheng-13732	395	19	2023	2023	NUM
fumecheng-13732	395	20	,	,	PUNCT
fumecheng-13732	395	21	design	design	NOUN
fumecheng-13732	395	22	and	and	CCONJ
fumecheng-13732	395	23	analysis	analysis	NOUN
fumecheng-13732	395	24	of	of	ADP
fumecheng-13732	395	25	a	a	DET
fumecheng-13732	395	26	novel	novel	ADJ
fumecheng-13732	395	27	low	low	ADJ
fumecheng-13732	395	28	rf	rf	NOUN
fumecheng-13732	395	29	mems	mem	NOUN
fumecheng-13732	395	30	switch	switch	VERB
fumecheng-13732	395	31	with	with	ADP
fumecheng-13732	395	32	low	low	ADJ
fumecheng-13732	395	33	pullin	pullin	NOUN
fumecheng-13732	395	34	voltage	voltage	NOUN
fumecheng-13732	395	35	and	and	CCONJ
fumecheng-13732	395	36	high	high	ADJ
fumecheng-13732	395	37	capacitance	capacitance	NOUN
fumecheng-13732	395	38	ratio	ratio	NOUN
fumecheng-13732	395	39	,	,	PUNCT
fumecheng-13732	395	40	microsystem	microsystem	NOUN
fumecheng-13732	395	41	technologies	technology	NOUN
fumecheng-13732	395	42	,	,	PUNCT
fumecheng-13732	395	43	29	29	NUM
fumecheng-13732	395	44	,	,	PUNCT
fumecheng-13732	395	45	pp	pp	ADJ
fumecheng-13732	395	46	.	.	PUNCT
fumecheng-13732	396	1	809–821	809–821	NUM
fumecheng-13732	396	2	.	.	PUNCT
fumecheng-13732	397	1	15	15	NUM
fumecheng-13732	397	2	.	.	PUNCT
fumecheng-13732	398	1	niu	niu	PROPN
fumecheng-13732	398	2	,	,	PUNCT
fumecheng-13732	398	3	j.y	j.y	PROPN
fumecheng-13732	398	4	.	.	PROPN
fumecheng-13732	398	5	,	,	PUNCT
fumecheng-13732	398	6	2024	2024	NUM
fumecheng-13732	398	7	,	,	PUNCT
fumecheng-13732	398	8	a	a	DET
fumecheng-13732	398	9	remark	remark	NOUN
fumecheng-13732	398	10	on	on	ADP
fumecheng-13732	398	11	a	a	DET
fumecheng-13732	398	12	strong	strong	ADJ
fumecheng-13732	398	13	minimum	minimum	ADJ
fumecheng-13732	398	14	condition	condition	NOUN
fumecheng-13732	398	15	of	of	ADP
fumecheng-13732	398	16	a	a	DET
fumecheng-13732	398	17	fractal	fractal	ADJ
fumecheng-13732	398	18	variational	variational	ADJ
fumecheng-13732	398	19	principle	principle	NOUN
fumecheng-13732	398	20	,	,	PUNCT
fumecheng-13732	398	21	thermal	thermal	ADJ
fumecheng-13732	398	22	science	science	NOUN
fumecheng-13732	398	23	,	,	PUNCT
fumecheng-13732	398	24	28(3a	28(3a	NUM
fumecheng-13732	398	25	)	)	PUNCT
fumecheng-13732	398	26	,	,	PUNCT
fumecheng-13732	398	27	pp	pp	ADP
fumecheng-13732	398	28	.	.	PUNCT
fumecheng-13732	399	1	2371	2371	NUM
fumecheng-13732	399	2	-	-	SYM
fumecheng-13732	399	3	2377	2377	NUM
fumecheng-13732	399	4	.	.	PUNCT
fumecheng-13732	400	1	16	16	NUM
fumecheng-13732	400	2	.	.	PUNCT
fumecheng-13732	401	1	shao	shao	PROPN
fumecheng-13732	401	2	,	,	PUNCT
fumecheng-13732	401	3	y.	y.	PROPN
fumecheng-13732	401	4	c.	c.	PROPN
fumecheng-13732	401	5	,	,	PUNCT
fumecheng-13732	401	6	cui	cui	PROPN
fumecheng-13732	401	7	,	,	PUNCT
fumecheng-13732	401	8	y.	y.	PROPN
fumecheng-13732	401	9	t.	t.	PROPN
fumecheng-13732	401	10	,	,	PUNCT
fumecheng-13732	401	11	2025	2025	NUM
fumecheng-13732	401	12	,	,	PUNCT
fumecheng-13732	401	13	mathematical	mathematical	ADJ
fumecheng-13732	401	14	approach	approach	NOUN
fumecheng-13732	401	15	for	for	ADP
fumecheng-13732	401	16	rapid	rapid	ADJ
fumecheng-13732	401	17	determination	determination	NOUN
fumecheng-13732	401	18	of	of	ADP
fumecheng-13732	401	19	pull	pull	NOUN
fumecheng-13732	401	20	in	in	ADV
fumecheng-13732	401	21	displacement	displacement	NOUN
fumecheng-13732	401	22	in	in	ADP
fumecheng-13732	401	23	mems	mem	NOUN
fumecheng-13732	401	24	devices	device	NOUN
fumecheng-13732	401	25	,	,	PUNCT
fumecheng-13732	401	26	frontiers	frontier	NOUN
fumecheng-13732	401	27	in	in	ADP
fumecheng-13732	401	28	physics	physics	NOUN
fumecheng-13732	401	29	,	,	PUNCT
fumecheng-13732	401	30	13	13	NUM
fumecheng-13732	401	31	,	,	PUNCT
fumecheng-13732	401	32	1521849	1521849	NUM
fumecheng-13732	401	33	.	.	PUNCT
fumecheng-13732	402	1	17	17	NUM
fumecheng-13732	402	2	.	.	X
fumecheng-13732	403	1	yang	yang	PROPN
fumecheng-13732	403	2	,	,	PUNCT
fumecheng-13732	403	3	q.	q.	PROPN
fumecheng-13732	403	4	,	,	PUNCT
fumecheng-13732	403	5	2023	2023	NUM
fumecheng-13732	403	6	,	,	PUNCT
fumecheng-13732	403	7	a	a	DET
fumecheng-13732	403	8	mathematical	mathematical	ADJ
fumecheng-13732	403	9	control	control	NOUN
fumecheng-13732	403	10	for	for	ADP
fumecheng-13732	403	11	the	the	DET
fumecheng-13732	403	12	pseudo	pseudo	NOUN
fumecheng-13732	403	13	-	-	ADJ
fumecheng-13732	403	14	pull	pull	NOUN
fumecheng-13732	403	15	-	-	PUNCT
fumecheng-13732	403	16	in	in	ADP
fumecheng-13732	403	17	stability	stability	NOUN
fumecheng-13732	403	18	arising	arise	VERB
fumecheng-13732	403	19	in	in	ADP
fumecheng-13732	403	20	a	a	DET
fumecheng-13732	403	21	micro	micro	ADJ
fumecheng-13732	403	22	-	-	ADJ
fumecheng-13732	403	23	electromechanical	electromechanical	ADJ
fumecheng-13732	403	24	system	system	NOUN
fumecheng-13732	403	25	,	,	PUNCT
fumecheng-13732	403	26	journal	journal	NOUN
fumecheng-13732	403	27	of	of	ADP
fumecheng-13732	403	28	low	low	ADJ
fumecheng-13732	403	29	frequency	frequency	NOUN
fumecheng-13732	403	30	noise	noise	NOUN
fumecheng-13732	403	31	,	,	PUNCT
fumecheng-13732	403	32	vibration	vibration	NOUN
fumecheng-13732	403	33	and	and	CCONJ
fumecheng-13732	403	34	active	active	ADJ
fumecheng-13732	403	35	control	control	NOUN
fumecheng-13732	403	36	,	,	PUNCT
fumecheng-13732	403	37	42(2	42(2	NOUN
fumecheng-13732	403	38	)	)	PUNCT
fumecheng-13732	403	39	,	,	PUNCT
fumecheng-13732	403	40	pp	pp	ADP
fumecheng-13732	403	41	.	.	PUNCT
fumecheng-13732	404	1	927	927	NUM
fumecheng-13732	404	2	-	-	SYM
fumecheng-13732	404	3	934	934	NUM
fumecheng-13732	404	4	.	.	PUNCT
fumecheng-13732	405	1	18	18	NUM
fumecheng-13732	405	2	.	.	X
fumecheng-13732	405	3	mohammadian	mohammadian	NOUN
fumecheng-13732	405	4	,	,	PUNCT
fumecheng-13732	405	5	m.	m.	NOUN
fumecheng-13732	405	6	,	,	PUNCT
fumecheng-13732	405	7	2024	2024	NUM
fumecheng-13732	405	8	,	,	PUNCT
fumecheng-13732	405	9	from	from	ADP
fumecheng-13732	405	10	periodic	periodic	NOUN
fumecheng-13732	405	11	to	to	ADP
fumecheng-13732	405	12	pseudo	pseudo	NOUN
fumecheng-13732	405	13	-	-	ADJ
fumecheng-13732	405	14	periodic	periodic	ADJ
fumecheng-13732	405	15	motion	motion	NOUN
fumecheng-13732	405	16	and	and	CCONJ
fumecheng-13732	405	17	pull	pull	NOUN
fumecheng-13732	405	18	-	-	PUNCT
fumecheng-13732	405	19	in	in	ADP
fumecheng-13732	405	20	instability	instability	NOUN
fumecheng-13732	405	21	of	of	ADP
fumecheng-13732	405	22	the	the	DET
fumecheng-13732	405	23	mwcnt	mwcnt	ADJ
fumecheng-13732	405	24	actuator	actuator	NOUN
fumecheng-13732	405	25	in	in	ADP
fumecheng-13732	405	26	the	the	DET
fumecheng-13732	405	27	vicinity	vicinity	NOUN
fumecheng-13732	405	28	of	of	ADP
fumecheng-13732	405	29	the	the	DET
fumecheng-13732	405	30	graphite	graphite	NOUN
fumecheng-13732	405	31	sheets	sheet	NOUN
fumecheng-13732	405	32	,	,	PUNCT
fumecheng-13732	405	33	chinese	chinese	ADJ
fumecheng-13732	405	34	journal	journal	PROPN
fumecheng-13732	405	35	of	of	ADP
fumecheng-13732	405	36	physics	physics	PROPN
fumecheng-13732	405	37	,	,	PUNCT
fumecheng-13732	405	38	90	90	NUM
fumecheng-13732	405	39	,	,	PUNCT
fumecheng-13732	405	40	pp	pp	ADJ
fumecheng-13732	405	41	.	.	PUNCT
fumecheng-13732	406	1	557	557	NUM
fumecheng-13732	406	2	-	-	SYM
fumecheng-13732	406	3	571	571	NUM
fumecheng-13732	406	4	.	.	PUNCT
fumecheng-13732	407	1	19	19	NUM
fumecheng-13732	407	2	.	.	PUNCT
fumecheng-13732	407	3	mojahedi	mojahedi	PROPN
fumecheng-13732	407	4	,	,	PUNCT
fumecheng-13732	407	5	m.	m.	NOUN
fumecheng-13732	407	6	,	,	PUNCT
fumecheng-13732	407	7	moghimi	moghimi	PROPN
fumecheng-13732	407	8	-	-	PUNCT
fumecheng-13732	407	9	zand	zand	PROPN
fumecheng-13732	407	10	,	,	PUNCT
fumecheng-13732	407	11	m.	m.	NOUN
fumecheng-13732	407	12	,	,	PUNCT
fumecheng-13732	407	13	ahmadian	ahmadian	ADJ
fumecheng-13732	407	14	,	,	PUNCT
fumecheng-13732	407	15	m.t	m.t	PROPN
fumecheng-13732	407	16	.	.	PROPN
fumecheng-13732	407	17	,	,	PUNCT
fumecheng-13732	407	18	2010	2010	NUM
fumecheng-13732	407	19	,	,	PUNCT
fumecheng-13732	407	20	static	static	ADJ
fumecheng-13732	407	21	pull	pull	NOUN
fumecheng-13732	407	22	-	-	PUNCT
fumecheng-13732	407	23	in	in	ADP
fumecheng-13732	407	24	analysis	analysis	NOUN
fumecheng-13732	407	25	of	of	ADP
fumecheng-13732	407	26	electrostatically	electrostatically	ADV
fumecheng-13732	407	27	actuated	actuate	VERB
fumecheng-13732	407	28	microbeams	microbeam	NOUN
fumecheng-13732	407	29	using	use	VERB
fumecheng-13732	407	30	homotopy	homotopy	NOUN
fumecheng-13732	407	31	perturbation	perturbation	NOUN
fumecheng-13732	407	32	method	method	NOUN
fumecheng-13732	407	33	,	,	PUNCT
fumecheng-13732	407	34	applied	apply	VERB
fumecheng-13732	407	35	mathematical	mathematical	ADJ
fumecheng-13732	407	36	modelling	modelling	NOUN
fumecheng-13732	407	37	,	,	PUNCT
fumecheng-13732	407	38	34(4	34(4	NUM
fumecheng-13732	407	39	)	)	PUNCT
fumecheng-13732	407	40	,	,	PUNCT
fumecheng-13732	407	41	pp	pp	ADP
fumecheng-13732	407	42	.	.	PUNCT
fumecheng-13732	408	1	1032	1032	NUM
fumecheng-13732	408	2	-	-	SYM
fumecheng-13732	408	3	1041	1041	NUM
fumecheng-13732	408	4	.	.	PUNCT
fumecheng-13732	409	1	20	20	NUM
fumecheng-13732	409	2	.	.	X
fumecheng-13732	410	1	nadeem	nadeem	PROPN
fumecheng-13732	410	2	,	,	PUNCT
fumecheng-13732	410	3	m	m	PROPN
fumecheng-13732	410	4	,	,	PUNCT
fumecheng-13732	410	5	ain	ain	PROPN
fumecheng-13732	410	6	,	,	PUNCT
fumecheng-13732	410	7	q.t	q.t	PROPN
fumecheng-13732	410	8	.	.	PROPN
fumecheng-13732	410	9	,	,	PUNCT
fumecheng-13732	410	10	almakayeel	almakayeel	PROPN
fumecheng-13732	410	11	,	,	PUNCT
fumecheng-13732	410	12	n.	n.	PROPN
fumecheng-13732	410	13	,	,	PUNCT
fumecheng-13732	410	14	shao	shao	PROPN
fumecheng-13732	410	15	,	,	PUNCT
fumecheng-13732	410	16	y.	y.	PROPN
fumecheng-13732	410	17	,	,	PUNCT
fumecheng-13732	410	18	wang	wang	PROPN
fumecheng-13732	410	19	,	,	PUNCT
fumecheng-13732	410	20	s.	s.	PROPN
fumecheng-13732	410	21	,	,	PUNCT
fumecheng-13732	410	22	shutaywi	shutaywi	PROPN
fumecheng-13732	410	23	,	,	PUNCT
fumecheng-13732	410	24	m.	m.	NOUN
fumecheng-13732	410	25	,	,	PUNCT
fumecheng-13732	410	26	2024	2024	NUM
fumecheng-13732	410	27	,	,	PUNCT
fumecheng-13732	410	28	analysis	analysis	NOUN
fumecheng-13732	410	29	of	of	ADP
fumecheng-13732	410	30	nanobeam	nanobeam	NOUN
fumecheng-13732	410	31	-	-	PUNCT
fumecheng-13732	410	32	based	base	VERB
fumecheng-13732	410	33	microstructure	microstructure	NOUN
fumecheng-13732	410	34	in	in	ADP
fumecheng-13732	410	35	n	n	CCONJ
fumecheng-13732	410	36	/	/	SYM
fumecheng-13732	410	37	mems	mem	NOUN
fumecheng-13732	410	38	system	system	NOUN
fumecheng-13732	410	39	using	use	VERB
fumecheng-13732	410	40	van	van	PROPN
fumecheng-13732	410	41	der	der	ADJ
fumecheng-13732	410	42	waals	waal	NOUN
fumecheng-13732	410	43	forces	force	NOUN
fumecheng-13732	410	44	,	,	PUNCT
fumecheng-13732	410	45	facta	facta	PROPN
fumecheng-13732	410	46	universitatis	universitatis	PROPN
fumecheng-13732	410	47	-	-	PUNCT
fumecheng-13732	410	48	series	series	NOUN
fumecheng-13732	410	49	mechanical	mechanical	ADJ
fumecheng-13732	410	50	engineering	engineering	NOUN
fumecheng-13732	410	51	,	,	PUNCT
fumecheng-13732	410	52	22(4	22(4	NUM
fumecheng-13732	410	53	)	)	PUNCT
fumecheng-13732	410	54	,	,	PUNCT
fumecheng-13732	410	55	pp	pp	PROPN
fumecheng-13732	410	56	.	.	PUNCT
fumecheng-13732	411	1	673	673	NUM
fumecheng-13732	411	2	-	-	SYM
fumecheng-13732	411	3	688	688	NUM
fumecheng-13732	411	4	.	.	PUNCT
fumecheng-13732	412	1	21	21	NUM
fumecheng-13732	412	2	.	.	PUNCT
fumecheng-13732	413	1	koochi	koochi	PROPN
fumecheng-13732	413	2	,	,	PUNCT
fumecheng-13732	413	3	a.	a.	NOUN
fumecheng-13732	413	4	,	,	PUNCT
fumecheng-13732	413	5	noghrehabadi	noghrehabadi	PROPN
fumecheng-13732	413	6	,	,	PUNCT
fumecheng-13732	413	7	a.	a.	PROPN
fumecheng-13732	413	8	,	,	PUNCT
fumecheng-13732	413	9	abadyan	abadyan	PROPN
fumecheng-13732	413	10	,	,	PUNCT
fumecheng-13732	413	11	m.	m.	NOUN
fumecheng-13732	413	12	,	,	PUNCT
fumecheng-13732	413	13	2011	2011	NUM
fumecheng-13732	413	14	,	,	PUNCT
fumecheng-13732	413	15	approximating	approximate	VERB
fumecheng-13732	413	16	the	the	DET
fumecheng-13732	413	17	effect	effect	NOUN
fumecheng-13732	413	18	of	of	ADP
fumecheng-13732	413	19	van	van	PROPN
fumecheng-13732	413	20	der	der	NOUN
fumecheng-13732	413	21	waals	waal	NOUN
fumecheng-13732	413	22	force	force	VERB
fumecheng-13732	413	23	on	on	ADP
fumecheng-13732	413	24	the	the	DET
fumecheng-13732	413	25	instability	instability	NOUN
fumecheng-13732	413	26	of	of	ADP
fumecheng-13732	413	27	electrostatic	electrostatic	ADJ
fumecheng-13732	413	28	nano	nano	NOUN
fumecheng-13732	413	29	-	-	NOUN
fumecheng-13732	413	30	cantilevers	cantilever	NOUN
fumecheng-13732	413	31	,	,	PUNCT
fumecheng-13732	413	32	international	international	ADJ
fumecheng-13732	413	33	journal	journal	NOUN
fumecheng-13732	413	34	of	of	ADP
fumecheng-13732	413	35	modern	modern	ADJ
fumecheng-13732	413	36	physics	physics	PROPN
fumecheng-13732	413	37	b	b	PROPN
fumecheng-13732	413	38	,	,	PUNCT
fumecheng-13732	413	39	25(29	25(29	NUM
fumecheng-13732	413	40	)	)	PUNCT
fumecheng-13732	413	41	,	,	PUNCT
fumecheng-13732	413	42	pp	pp	ADP
fumecheng-13732	413	43	.	.	PUNCT
fumecheng-13732	414	1	3965	3965	NUM
fumecheng-13732	414	2	-	-	SYM
fumecheng-13732	414	3	3976	3976	NUM
fumecheng-13732	414	4	.	.	PUNCT
fumecheng-13732	415	1	22	22	NUM
fumecheng-13732	415	2	.	.	PUNCT
fumecheng-13732	416	1	feng	feng	PROPN
fumecheng-13732	416	2	,	,	PUNCT
fumecheng-13732	416	3	g.q	g.q	PROPN
fumecheng-13732	416	4	,	,	PUNCT
fumecheng-13732	416	5	,	,	PUNCT
fumecheng-13732	416	6	zhang	zhang	PROPN
fumecheng-13732	416	7	,	,	PUNCT
fumecheng-13732	416	8	l.	l.	PROPN
fumecheng-13732	416	9	,	,	PUNCT
fumecheng-13732	416	10	tang	tang	PROPN
fumecheng-13732	416	11	,	,	PUNCT
fumecheng-13732	416	12	w.	w.	NOUN
fumecheng-13732	416	13	,	,	PUNCT
fumecheng-13732	416	14	2023	2023	NUM
fumecheng-13732	416	15	,	,	PUNCT
fumecheng-13732	416	16	fractal	fractal	ADJ
fumecheng-13732	416	17	pull	pull	NOUN
fumecheng-13732	416	18	-	-	PUNCT
fumecheng-13732	416	19	in	in	ADP
fumecheng-13732	416	20	motion	motion	NOUN
fumecheng-13732	416	21	of	of	ADP
fumecheng-13732	416	22	electrostatic	electrostatic	ADJ
fumecheng-13732	416	23	mems	mem	NOUN
fumecheng-13732	416	24	resonators	resonator	NOUN
fumecheng-13732	416	25	by	by	ADP
fumecheng-13732	416	26	the	the	DET
fumecheng-13732	416	27	variational	variational	ADJ
fumecheng-13732	416	28	iteration	iteration	NOUN
fumecheng-13732	416	29	method	method	NOUN
fumecheng-13732	416	30	,	,	PUNCT
fumecheng-13732	416	31	fractals	fractal	NOUN
fumecheng-13732	416	32	,	,	PUNCT
fumecheng-13732	416	33	31(9	31(9	NUM
fumecheng-13732	416	34	)	)	PUNCT
fumecheng-13732	416	35	,	,	PUNCT
fumecheng-13732	416	36	2350122	2350122	NUM
fumecheng-13732	416	37	.	.	PUNCT
fumecheng-13732	417	1	23	23	NUM
fumecheng-13732	417	2	.	.	X
fumecheng-13732	418	1	zhang	zhang	PROPN
fumecheng-13732	418	2	,	,	PUNCT
fumecheng-13732	418	3	y.	y.	PROPN
fumecheng-13732	418	4	n.	n.	PROPN
fumecheng-13732	418	5	,	,	PUNCT
fumecheng-13732	418	6	tian	tian	PROPN
fumecheng-13732	418	7	,	,	PUNCT
fumecheng-13732	418	8	d.	d.	PROPN
fumecheng-13732	418	9	,	,	PUNCT
fumecheng-13732	418	10	pang	pang	NOUN
fumecheng-13732	418	11	,	,	PUNCT
fumecheng-13732	418	12	j.	j.	PROPN
fumecheng-13732	418	13	,	,	PUNCT
fumecheng-13732	418	14	2022	2022	NUM
fumecheng-13732	418	15	,	,	PUNCT
fumecheng-13732	418	16	a	a	DET
fumecheng-13732	418	17	fast	fast	ADJ
fumecheng-13732	418	18	estimation	estimation	NOUN
fumecheng-13732	418	19	of	of	ADP
fumecheng-13732	418	20	the	the	DET
fumecheng-13732	418	21	frequency	frequency	NOUN
fumecheng-13732	418	22	property	property	NOUN
fumecheng-13732	418	23	of	of	ADP
fumecheng-13732	418	24	the	the	DET
fumecheng-13732	418	25	microelectromechanical	microelectromechanical	ADJ
fumecheng-13732	418	26	system	system	NOUN
fumecheng-13732	418	27	oscillator	oscillator	NOUN
fumecheng-13732	418	28	,	,	PUNCT
fumecheng-13732	418	29	journal	journal	NOUN
fumecheng-13732	418	30	of	of	ADP
fumecheng-13732	418	31	low	low	ADJ
fumecheng-13732	418	32	frequency	frequency	NOUN
fumecheng-13732	418	33	noise	noise	NOUN
fumecheng-13732	418	34	vibration	vibration	NOUN
fumecheng-13732	418	35	and	and	CCONJ
fumecheng-13732	418	36	active	active	ADJ
fumecheng-13732	418	37	control	control	NOUN
fumecheng-13732	418	38	,	,	PUNCT
fumecheng-13732	418	39	41(1	41(1	NUM
fumecheng-13732	418	40	)	)	PUNCT
fumecheng-13732	418	41	,	,	PUNCT
fumecheng-13732	418	42	pp	pp	ADP
fumecheng-13732	418	43	.	.	PUNCT
fumecheng-13732	419	1	160	160	NUM
fumecheng-13732	419	2	-	-	SYM
fumecheng-13732	419	3	166	166	NUM
fumecheng-13732	419	4	.	.	PUNCT
fumecheng-13732	420	1	24	24	NUM
fumecheng-13732	420	2	.	.	X
fumecheng-13732	421	1	zhang	zhang	PROPN
fumecheng-13732	421	2	,	,	PUNCT
fumecheng-13732	421	3	y.n	y.n	PROPN
fumecheng-13732	421	4	.	.	PROPN
fumecheng-13732	421	5	,	,	PUNCT
fumecheng-13732	421	6	han	han	PROPN
fumecheng-13732	421	7	,	,	PUNCT
fumecheng-13732	421	8	y.m	y.m	PROPN
fumecheng-13732	421	9	.	.	PROPN
fumecheng-13732	421	10	,	,	PUNCT
fumecheng-13732	421	11	zhao	zhao	PROPN
fumecheng-13732	421	12	,	,	PUNCT
fumecheng-13732	421	13	x.	x.	PROPN
fumecheng-13732	421	14	,	,	PUNCT
fumecheng-13732	421	15	zhao	zhao	PROPN
fumecheng-13732	421	16	,	,	PUNCT
fumecheng-13732	421	17	z.	z.	PROPN
fumecheng-13732	421	18	,	,	PUNCT
fumecheng-13732	421	19	pang	pang	NOUN
fumecheng-13732	421	20	,	,	PUNCT
fumecheng-13732	421	21	j.	j.	PROPN
fumecheng-13732	421	22	,	,	PUNCT
fumecheng-13732	421	23	2024	2024	NUM
fumecheng-13732	421	24	,	,	PUNCT
fumecheng-13732	421	25	applying	apply	VERB
fumecheng-13732	421	26	numerical	numerical	ADJ
fumecheng-13732	421	27	control	control	NOUN
fumecheng-13732	421	28	to	to	PART
fumecheng-13732	421	29	analyze	analyze	VERB
fumecheng-13732	421	30	the	the	DET
fumecheng-13732	421	31	pull	pull	VERB
fumecheng-13732	421	32	-	-	PUNCT
fumecheng-13732	421	33	in	in	ADP
fumecheng-13732	421	34	stability	stability	NOUN
fumecheng-13732	421	35	of	of	ADP
fumecheng-13732	421	36	mems	mem	NOUN
fumecheng-13732	421	37	systems	system	NOUN
fumecheng-13732	421	38	,	,	PUNCT
fumecheng-13732	421	39	thermal	thermal	ADJ
fumecheng-13732	421	40	science	science	NOUN
fumecheng-13732	421	41	,	,	PUNCT
fumecheng-13732	421	42	28(3a	28(3a	NUM
fumecheng-13732	421	43	)	)	PUNCT
fumecheng-13732	421	44	,	,	PUNCT
fumecheng-13732	421	45	pp	pp	PROPN
fumecheng-13732	421	46	.	.	PUNCT
fumecheng-13732	421	47	2171	2171	NUM
fumecheng-13732	421	48	-	-	SYM
fumecheng-13732	421	49	2178	2178	NUM
fumecheng-13732	421	50	.	.	PUNCT
fumecheng-13732	422	1	25	25	NUM
fumecheng-13732	422	2	.	.	PUNCT
fumecheng-13732	423	1	liu	liu	PROPN
fumecheng-13732	423	2	,	,	PUNCT
fumecheng-13732	423	3	h.m	h.m	PROPN
fumecheng-13732	423	4	.	.	PROPN
fumecheng-13732	423	5	,	,	PUNCT
fumecheng-13732	423	6	2005	2005	NUM
fumecheng-13732	423	7	,	,	PUNCT
fumecheng-13732	423	8	generalized	generalize	VERB
fumecheng-13732	423	9	variational	variational	ADJ
fumecheng-13732	423	10	principles	principle	NOUN
fumecheng-13732	423	11	for	for	ADP
fumecheng-13732	423	12	ion	ion	NOUN
fumecheng-13732	423	13	acoustic	acoustic	ADJ
fumecheng-13732	423	14	plasma	plasma	NOUN
fumecheng-13732	423	15	waves	wave	NOUN
fumecheng-13732	423	16	by	by	ADP
fumecheng-13732	423	17	he	he	PRON
fumecheng-13732	423	18	's	be	AUX
fumecheng-13732	423	19	semi	semi	ADJ
fumecheng-13732	423	20	-	-	ADJ
fumecheng-13732	423	21	inverse	inverse	ADJ
fumecheng-13732	423	22	method	method	NOUN
fumecheng-13732	423	23	,	,	PUNCT
fumecheng-13732	423	24	chaos	chaos	NOUN
fumecheng-13732	423	25	,	,	PUNCT
fumecheng-13732	423	26	solitons	soliton	NOUN
fumecheng-13732	423	27	&	&	CCONJ
fumecheng-13732	423	28	fractals	fractal	NOUN
fumecheng-13732	423	29	,	,	PUNCT
fumecheng-13732	423	30	23(2	23(2	NUM
fumecheng-13732	423	31	)	)	PUNCT
fumecheng-13732	423	32	,	,	PUNCT
fumecheng-13732	424	1	pp	pp	ADP
fumecheng-13732	424	2	.	.	PUNCT
fumecheng-13732	425	1	573	573	NUM
fumecheng-13732	425	2	-	-	SYM
fumecheng-13732	425	3	576	576	NUM
fumecheng-13732	425	4	.	.	PUNCT
fumecheng-13732	426	1	26	26	NUM
fumecheng-13732	426	2	.	.	PUNCT
fumecheng-13732	427	1	wu	wu	PROPN
fumecheng-13732	427	2	,	,	PUNCT
fumecheng-13732	427	3	y.	y.	PROPN
fumecheng-13732	427	4	,	,	PUNCT
fumecheng-13732	427	5	feng	feng	PROPN
fumecheng-13732	427	6	,	,	PUNCT
fumecheng-13732	427	7	g.q	g.q	PROPN
fumecheng-13732	427	8	.	.	PROPN
fumecheng-13732	427	9	,	,	PUNCT
fumecheng-13732	427	10	2023	2023	NUM
fumecheng-13732	427	11	,	,	PUNCT
fumecheng-13732	427	12	variational	variational	ADJ
fumecheng-13732	427	13	principle	principle	NOUN
fumecheng-13732	427	14	for	for	ADP
fumecheng-13732	427	15	an	an	DET
fumecheng-13732	427	16	incompressible	incompressible	ADJ
fumecheng-13732	427	17	flow	flow	NOUN
fumecheng-13732	427	18	,	,	PUNCT
fumecheng-13732	427	19	thermal	thermal	ADJ
fumecheng-13732	427	20	science	science	NOUN
fumecheng-13732	427	21	,	,	PUNCT
fumecheng-13732	427	22	27(3a	27(3a	NUM
fumecheng-13732	427	23	)	)	PUNCT
fumecheng-13732	427	24	,	,	PUNCT
fumecheng-13732	427	25	pp	pp	PROPN
fumecheng-13732	427	26	.	.	PUNCT
fumecheng-13732	428	1	2039	2039	NUM
fumecheng-13732	428	2	-	-	SYM
fumecheng-13732	428	3	2047	2047	NUM
fumecheng-13732	428	4	.	.	PUNCT
fumecheng-13732	429	1	27	27	NUM
fumecheng-13732	429	2	.	.	PUNCT
fumecheng-13732	430	1	ma	ma	PROPN
fumecheng-13732	430	2	,	,	PUNCT
fumecheng-13732	430	3	h.j	h.j	PROPN
fumecheng-13732	430	4	.	.	PROPN
fumecheng-13732	430	5	,	,	PUNCT
fumecheng-13732	430	6	2023	2023	NUM
fumecheng-13732	430	7	,	,	PUNCT
fumecheng-13732	430	8	variational	variational	ADJ
fumecheng-13732	430	9	principle	principle	NOUN
fumecheng-13732	430	10	for	for	ADP
fumecheng-13732	430	11	a	a	DET
fumecheng-13732	430	12	generalized	generalized	ADJ
fumecheng-13732	430	13	rabinowitsch	rabinowitsch	ADJ
fumecheng-13732	430	14	lubrication	lubrication	NOUN
fumecheng-13732	430	15	,	,	PUNCT
fumecheng-13732	430	16	thermal	thermal	ADJ
fumecheng-13732	430	17	science	science	NOUN
fumecheng-13732	430	18	,	,	PUNCT
fumecheng-13732	430	19	27(3a	27(3a	NUM
fumecheng-13732	430	20	)	)	PUNCT
fumecheng-13732	430	21	,	,	PUNCT
fumecheng-13732	430	22	pp	pp	PROPN
fumecheng-13732	430	23	.	.	PUNCT
fumecheng-13732	431	1	2001	2001	NUM
fumecheng-13732	431	2	-	-	SYM
fumecheng-13732	431	3	2007	2007	NUM
fumecheng-13732	431	4	.	.	PUNCT
fumecheng-13732	432	1	28	28	NUM
fumecheng-13732	432	2	.	.	PUNCT
fumecheng-13732	433	1	cao	cao	PROPN
fumecheng-13732	433	2	,	,	PUNCT
fumecheng-13732	433	3	x.q	x.q	PROPN
fumecheng-13732	433	4	.	.	PROPN
fumecheng-13732	433	5	,	,	PUNCT
fumecheng-13732	433	6	zhou	zhou	PROPN
fumecheng-13732	433	7	,	,	PUNCT
fumecheng-13732	433	8	m.g	m.g	PROPN
fumecheng-13732	433	9	.	.	PROPN
fumecheng-13732	433	10	,	,	PUNCT
fumecheng-13732	433	11	xie	xie	PROPN
fumecheng-13732	433	12	,	,	PUNCT
fumecheng-13732	433	13	s.h	s.h	PROPN
fumecheng-13732	433	14	.	.	PROPN
fumecheng-13732	433	15	,	,	PUNCT
fumecheng-13732	433	16	guo	guo	PROPN
fumecheng-13732	433	17	,	,	PUNCT
fumecheng-13732	433	18	y.n	y.n	PROPN
fumecheng-13732	433	19	.	.	PROPN
fumecheng-13732	433	20	,	,	PUNCT
fumecheng-13732	433	21	peng	peng	PROPN
fumecheng-13732	433	22	,	,	PUNCT
fumecheng-13732	433	23	k.c	k.c	PROPN
fumecheng-13732	433	24	.	.	PROPN
fumecheng-13732	433	25	,	,	PUNCT
fumecheng-13732	433	26	2024	2024	NUM
fumecheng-13732	433	27	,	,	PUNCT
fumecheng-13732	433	28	new	new	ADJ
fumecheng-13732	433	29	variational	variational	ADJ
fumecheng-13732	433	30	principles	principle	NOUN
fumecheng-13732	433	31	for	for	ADP
fumecheng-13732	433	32	two	two	NUM
fumecheng-13732	433	33	kinds	kind	NOUN
fumecheng-13732	433	34	of	of	ADP
fumecheng-13732	433	35	nonlinear	nonlinear	ADJ
fumecheng-13732	433	36	partial	partial	ADJ
fumecheng-13732	433	37	differential	differential	NOUN
fumecheng-13732	433	38	equation	equation	NOUN
fumecheng-13732	433	39	in	in	ADP
fumecheng-13732	433	40	shallow	shallow	ADJ
fumecheng-13732	433	41	water	water	NOUN
fumecheng-13732	433	42	,	,	PUNCT
fumecheng-13732	433	43	journal	journal	NOUN
fumecheng-13732	433	44	of	of	ADP
fumecheng-13732	433	45	applied	apply	VERB
fumecheng-13732	433	46	and	and	CCONJ
fumecheng-13732	433	47	computation	computation	NOUN
fumecheng-13732	433	48	mechanics	mechanic	NOUN
fumecheng-13732	433	49	,	,	PUNCT
fumecheng-13732	433	50	10(2	10(2	NUM
fumecheng-13732	433	51	)	)	PUNCT
fumecheng-13732	433	52	,	,	PUNCT
fumecheng-13732	433	53	pp	pp	PROPN
fumecheng-13732	433	54	.	.	PUNCT
fumecheng-13732	434	1	406	406	NUM
fumecheng-13732	434	2	-	-	SYM
fumecheng-13732	434	3	412	412	NUM
fumecheng-13732	434	4	.	.	NOUN
fumecheng-13732	434	5	29	29	NUM
fumecheng-13732	434	6	.	.	PUNCT
fumecheng-13732	435	1	wang	wang	PROPN
fumecheng-13732	435	2	,	,	PUNCT
fumecheng-13732	435	3	f.y	f.y	PROPN
fumecheng-13732	435	4	.	.	PROPN
fumecheng-13732	435	5	,	,	PUNCT
fumecheng-13732	435	6	sun	sun	PROPN
fumecheng-13732	435	7	,	,	PUNCT
fumecheng-13732	435	8	j.s	j.s	PROPN
fumecheng-13732	435	9	.	.	PROPN
fumecheng-13732	435	10	,	,	PUNCT
fumecheng-13732	435	11	2024	2024	NUM
fumecheng-13732	435	12	,	,	PUNCT
fumecheng-13732	435	13	solitary	solitary	ADJ
fumecheng-13732	435	14	wave	wave	NOUN
fumecheng-13732	435	15	solutions	solution	NOUN
fumecheng-13732	435	16	of	of	ADP
fumecheng-13732	435	17	the	the	DET
fumecheng-13732	435	18	navier	navier	NOUN
fumecheng-13732	435	19	-	-	PUNCT
fumecheng-13732	435	20	stokes	stoke	NOUN
fumecheng-13732	435	21	equations	equation	NOUN
fumecheng-13732	435	22	by	by	ADP
fumecheng-13732	435	23	he	he	PRON
fumecheng-13732	435	24	's	's	PART
fumecheng-13732	435	25	variational	variational	ADJ
fumecheng-13732	435	26	method	method	NOUN
fumecheng-13732	435	27	,	,	PUNCT
fumecheng-13732	435	28	thermal	thermal	ADJ
fumecheng-13732	435	29	science	science	NOUN
fumecheng-13732	435	30	,	,	PUNCT
fumecheng-13732	435	31	28(3a	28(3a	NUM
fumecheng-13732	435	32	)	)	PUNCT
fumecheng-13732	435	33	,	,	PUNCT
fumecheng-13732	435	34	pp	pp	PROPN
fumecheng-13732	435	35	.	.	PUNCT
fumecheng-13732	435	36	1959	1959	NUM
fumecheng-13732	435	37	-	-	SYM
fumecheng-13732	435	38	1966	1966	NUM
fumecheng-13732	435	39	.	.	PUNCT
fumecheng-13732	436	1	30	30	NUM
fumecheng-13732	436	2	.	.	X
fumecheng-13732	437	1	tian	tian	ADJ
fumecheng-13732	437	2	,	,	PUNCT
fumecheng-13732	437	3	y.	y.	PROPN
fumecheng-13732	437	4	,	,	PUNCT
fumecheng-13732	437	5	shao	shao	PROPN
fumecheng-13732	437	6	,	,	PUNCT
fumecheng-13732	437	7	y.	y.	PROPN
fumecheng-13732	437	8	,	,	PUNCT
fumecheng-13732	437	9	shen	shen	PROPN
fumecheng-13732	437	10	,	,	PUNCT
fumecheng-13732	437	11	y.	y.	PROPN
fumecheng-13732	437	12	,	,	PUNCT
fumecheng-13732	437	13	he	he	PRON
fumecheng-13732	437	14	,	,	PUNCT
fumecheng-13732	437	15	j.h	j.h	PROPN
fumecheng-13732	437	16	.	.	PROPN
fumecheng-13732	437	17	,	,	PUNCT
fumecheng-13732	437	18	2024	2024	NUM
fumecheng-13732	437	19	,	,	PUNCT
fumecheng-13732	437	20	a	a	DET
fumecheng-13732	437	21	variational	variational	ADJ
fumecheng-13732	437	22	principle	principle	NOUN
fumecheng-13732	437	23	of	of	ADP
fumecheng-13732	437	24	an	an	DET
fumecheng-13732	437	25	electrohydrodynamic	electrohydrodynamic	ADJ
fumecheng-13732	437	26	fluid	fluid	NOUN
fumecheng-13732	437	27	,	,	PUNCT
fumecheng-13732	437	28	modern	modern	ADJ
fumecheng-13732	437	29	physics	physics	NOUN
fumecheng-13732	437	30	letters	letter	NOUN
fumecheng-13732	437	31	a	a	PRON
fumecheng-13732	437	32	,	,	PUNCT
fumecheng-13732	437	33	40(4	40(4	NUM
fumecheng-13732	437	34	)	)	PUNCT
fumecheng-13732	437	35	,	,	PUNCT
fumecheng-13732	437	36	2450223	2450223	NUM
fumecheng-13732	437	37	.	.	PUNCT
fumecheng-13732	438	1	31	31	NUM
fumecheng-13732	438	2	.	.	PUNCT
fumecheng-13732	439	1	he	he	PRON
fumecheng-13732	439	2	,	,	PUNCT
fumecheng-13732	439	3	j.	j.	PROPN
fumecheng-13732	439	4	h.	h.	PROPN
fumecheng-13732	439	5	,	,	PUNCT
fumecheng-13732	439	6	2024	2024	NUM
fumecheng-13732	439	7	,	,	PUNCT
fumecheng-13732	439	8	an	an	DET
fumecheng-13732	439	9	old	old	ADJ
fumecheng-13732	439	10	babylonian	babylonian	ADJ
fumecheng-13732	439	11	algorithm	algorithm	NOUN
fumecheng-13732	439	12	and	and	CCONJ
fumecheng-13732	439	13	its	its	PRON
fumecheng-13732	439	14	modern	modern	ADJ
fumecheng-13732	439	15	applications	application	NOUN
fumecheng-13732	439	16	,	,	PUNCT
fumecheng-13732	439	17	symmetry	symmetry	NOUN
fumecheng-13732	439	18	,	,	PUNCT
fumecheng-13732	439	19	16	16	NUM
fumecheng-13732	439	20	,	,	PUNCT
fumecheng-13732	439	21	1467	1467	NUM
fumecheng-13732	439	22	.	.	PUNCT
fumecheng-13732	439	23	32	32	NUM
fumecheng-13732	439	24	.	.	PUNCT
fumecheng-13732	440	1	khan	khan	PROPN
fumecheng-13732	440	2	,	,	PUNCT
fumecheng-13732	440	3	w.a	w.a	PROPN
fumecheng-13732	440	4	.	.	PROPN
fumecheng-13732	440	5	,	,	PUNCT
fumecheng-13732	440	6	2022	2022	NUM
fumecheng-13732	440	7	,	,	PUNCT
fumecheng-13732	440	8	numerical	numerical	PROPN
fumecheng-13732	440	9	simulation	simulation	NOUN
fumecheng-13732	440	10	of	of	ADP
fumecheng-13732	440	11	chun	chun	PROPN
fumecheng-13732	440	12	-	-	PUNCT
fumecheng-13732	440	13	hui	hui	PROPN
fumecheng-13732	441	1	he	he	PRON
fumecheng-13732	441	2	's	be	AUX
fumecheng-13732	441	3	iteration	iteration	NOUN
fumecheng-13732	441	4	method	method	NOUN
fumecheng-13732	441	5	with	with	ADP
fumecheng-13732	441	6	applications	application	NOUN
fumecheng-13732	441	7	in	in	ADP
fumecheng-13732	441	8	engineering	engineering	NOUN
fumecheng-13732	441	9	,	,	PUNCT
fumecheng-13732	441	10	international	international	ADJ
fumecheng-13732	441	11	journal	journal	NOUN
fumecheng-13732	441	12	of	of	ADP
fumecheng-13732	441	13	numerical	numerical	ADJ
fumecheng-13732	441	14	methods	method	NOUN
fumecheng-13732	441	15	for	for	ADP
fumecheng-13732	441	16	heat	heat	NOUN
fumecheng-13732	441	17	&	&	CCONJ
fumecheng-13732	441	18	fluid	fluid	ADJ
fumecheng-13732	441	19	flow	flow	NOUN
fumecheng-13732	441	20	,	,	PUNCT
fumecheng-13732	441	21	32(3	32(3	NUM
fumecheng-13732	441	22	)	)	PUNCT
fumecheng-13732	441	23	,	,	PUNCT
fumecheng-13732	441	24	pp	pp	PROPN
fumecheng-13732	441	25	.	.	PUNCT
fumecheng-13732	442	1	944	944	NUM
fumecheng-13732	442	2	-	-	SYM
fumecheng-13732	442	3	955	955	NUM
fumecheng-13732	442	4	.	.	PUNCT
fumecheng-13732	443	1	33	33	NUM
fumecheng-13732	443	2	.	.	PUNCT
fumecheng-13732	444	1	he	he	PRON
fumecheng-13732	444	2	,	,	PUNCT
fumecheng-13732	444	3	c.h	c.h	PROPN
fumecheng-13732	444	4	.	.	PROPN
fumecheng-13732	444	5	,	,	PUNCT
fumecheng-13732	444	6	liu	liu	PROPN
fumecheng-13732	444	7	,	,	PUNCT
fumecheng-13732	444	8	h.w	h.w	PROPN
fumecheng-13732	444	9	.	.	PROPN
fumecheng-13732	444	10	,	,	PUNCT
fumecheng-13732	444	11	liu	liu	PROPN
fumecheng-13732	444	12	,	,	PUNCT
fumecheng-13732	444	13	c.	c.	PROPN
fumecheng-13732	444	14	,	,	PUNCT
fumecheng-13732	444	15	2024	2024	NUM
fumecheng-13732	444	16	,	,	PUNCT
fumecheng-13732	444	17	a	a	DET
fumecheng-13732	444	18	fractal	fractal	ADV
fumecheng-13732	444	19	-	-	PUNCT
fumecheng-13732	444	20	based	base	VERB
fumecheng-13732	444	21	approach	approach	NOUN
fumecheng-13732	444	22	to	to	ADP
fumecheng-13732	444	23	the	the	DET
fumecheng-13732	444	24	mechanical	mechanical	ADJ
fumecheng-13732	444	25	properties	property	NOUN
fumecheng-13732	444	26	of	of	ADP
fumecheng-13732	444	27	recycled	recycled	ADJ
fumecheng-13732	444	28	aggregate	aggregate	ADJ
fumecheng-13732	444	29	concretes	concrete	NOUN
fumecheng-13732	444	30	,	,	PUNCT
fumecheng-13732	444	31	facta	facta	PROPN
fumecheng-13732	444	32	universitatis	universitatis	PROPN
fumecheng-13732	444	33	-	-	PUNCT
fumecheng-13732	444	34	series	series	NOUN
fumecheng-13732	444	35	mechanical	mechanical	ADJ
fumecheng-13732	444	36	engineering	engineering	NOUN
fumecheng-13732	444	37	,	,	PUNCT
fumecheng-13732	444	38	22(2	22(2	NUM
fumecheng-13732	444	39	)	)	PUNCT
fumecheng-13732	444	40	,	,	PUNCT
fumecheng-13732	444	41	pp	pp	PROPN
fumecheng-13732	444	42	.	.	PUNCT
fumecheng-13732	444	43	329	329	NUM
fumecheng-13732	444	44	-	-	SYM
fumecheng-13732	444	45	342	342	NUM
fumecheng-13732	444	46	.	.	PUNCT
fumecheng-13732	445	1	34	34	NUM
fumecheng-13732	445	2	.	.	PUNCT
fumecheng-13732	446	1	liang	liang	PROPN
fumecheng-13732	446	2	,	,	PUNCT
fumecheng-13732	446	3	x.m	x.m	PROPN
fumecheng-13732	446	4	.	.	PROPN
fumecheng-13732	446	5	,	,	PUNCT
fumecheng-13732	446	6	chen	chen	PROPN
fumecheng-13732	446	7	,	,	PUNCT
fumecheng-13732	446	8	s.w	s.w	PROPN
fumecheng-13732	446	9	.	.	PROPN
fumecheng-13732	446	10	,	,	PUNCT
fumecheng-13732	446	11	wang	wang	PROPN
fumecheng-13732	446	12	,	,	PUNCT
fumecheng-13732	446	13	s.h	s.h	PROPN
fumecheng-13732	446	14	.	.	PROPN
fumecheng-13732	446	15	,	,	PUNCT
fumecheng-13732	446	16	gong	gong	PROPN
fumecheng-13732	446	17	,	,	PUNCT
fumecheng-13732	446	18	z.y	z.y	PROPN
fumecheng-13732	446	19	.	.	PROPN
fumecheng-13732	446	20	,	,	PUNCT
fumecheng-13732	446	21	feng	feng	PROPN
fumecheng-13732	446	22	,	,	PUNCT
fumecheng-13732	446	23	j.	j.	PROPN
fumecheng-13732	446	24	,	,	PUNCT
fumecheng-13732	446	25	wang	wang	PROPN
fumecheng-13732	446	26	,	,	PUNCT
fumecheng-13732	446	27	g.f	g.f	PROPN
fumecheng-13732	446	28	.	.	PROPN
fumecheng-13732	446	29	,	,	PUNCT
fumecheng-13732	446	30	2024	2024	NUM
fumecheng-13732	446	31	,	,	PUNCT
fumecheng-13732	446	32	adhesive	adhesive	ADJ
fumecheng-13732	446	33	contact	contact	NOUN
fumecheng-13732	446	34	of	of	ADP
fumecheng-13732	446	35	elastic	elastic	ADJ
fumecheng-13732	446	36	solids	solid	NOUN
fumecheng-13732	446	37	with	with	ADP
fumecheng-13732	446	38	self	self	NOUN
fumecheng-13732	446	39	-	-	PUNCT
fumecheng-13732	446	40	affine	affine	NOUN
fumecheng-13732	446	41	fractal	fractal	ADJ
fumecheng-13732	446	42	rough	rough	ADJ
fumecheng-13732	446	43	surfaces	surface	NOUN
fumecheng-13732	446	44	,	,	PUNCT
fumecheng-13732	446	45	acta	acta	PROPN
fumecheng-13732	446	46	mechanica	mechanica	PROPN
fumecheng-13732	446	47	solida	solida	PROPN
fumecheng-13732	446	48	sinica	sinica	PROPN
fumecheng-13732	446	49	,	,	PUNCT
fumecheng-13732	446	50	37	37	NUM
fumecheng-13732	446	51	,	,	PUNCT
fumecheng-13732	446	52	pp	pp	ADJ
fumecheng-13732	446	53	.	.	PUNCT
fumecheng-13732	447	1	265	265	NUM
fumecheng-13732	447	2	-	-	SYM
fumecheng-13732	447	3	270	270	NUM
fumecheng-13732	447	4	.	.	NOUN
fumecheng-13732	448	1	35	35	NUM
fumecheng-13732	448	2	.	.	PUNCT
fumecheng-13732	449	1	wu	wu	PROPN
fumecheng-13732	449	2	,	,	PUNCT
fumecheng-13732	449	3	m.	m.	NOUN
fumecheng-13732	449	4	,	,	PUNCT
fumecheng-13732	449	5	shen	shen	PROPN
fumecheng-13732	449	6	,	,	PUNCT
fumecheng-13732	449	7	s.	s.	PROPN
fumecheng-13732	449	8	,	,	PUNCT
fumecheng-13732	449	9	yang	yang	PROPN
fumecheng-13732	449	10	,	,	PUNCT
fumecheng-13732	449	11	x.	x.	PROPN
fumecheng-13732	449	12	,	,	PUNCT
fumecheng-13732	449	13	dong	dong	PROPN
fumecheng-13732	449	14	,	,	PUNCT
fumecheng-13732	449	15	w.	w.	PROPN
fumecheng-13732	449	16	,	,	PUNCT
fumecheng-13732	449	17	song	song	NOUN
fumecheng-13732	449	18	,	,	PUNCT
fumecheng-13732	449	19	f.	f.	PROPN
fumecheng-13732	449	20	,	,	PUNCT
fumecheng-13732	449	21	zhu	zhu	PROPN
fumecheng-13732	449	22	,	,	PUNCT
fumecheng-13732	449	23	y.	y.	PROPN
fumecheng-13732	449	24	,	,	PUNCT
fumecheng-13732	449	25	wang	wang	PROPN
fumecheng-13732	449	26	,	,	PUNCT
fumecheng-13732	449	27	z.	z.	PROPN
fumecheng-13732	449	28	,	,	PUNCT
fumecheng-13732	449	29	2023	2023	NUM
fumecheng-13732	449	30	,	,	PUNCT
fumecheng-13732	449	31	advances	advance	NOUN
fumecheng-13732	449	32	in	in	ADP
fumecheng-13732	449	33	the	the	DET
fumecheng-13732	449	34	enhancement	enhancement	NOUN
fumecheng-13732	449	35	of	of	ADP
fumecheng-13732	449	36	bionic	bionic	ADJ
fumecheng-13732	449	37	fractal	fractal	ADJ
fumecheng-13732	449	38	microchannel	microchannel	PROPN
fumecheng-13732	449	39	heat	heat	PROPN
fumecheng-13732	449	40	transfer	transfer	NOUN
fumecheng-13732	449	41	process	process	NOUN
fumecheng-13732	449	42	,	,	PUNCT
fumecheng-13732	449	43	journal	journal	NOUN
fumecheng-13732	449	44	of	of	ADP
fumecheng-13732	449	45	thermal	thermal	ADJ
fumecheng-13732	449	46	analysis	analysis	NOUN
fumecheng-13732	449	47	and	and	CCONJ
fumecheng-13732	449	48	calorimetry	calorimetry	NOUN
fumecheng-13732	449	49	,	,	PUNCT
fumecheng-13732	449	50	148	148	NUM
fumecheng-13732	449	51	,	,	PUNCT
fumecheng-13732	449	52	pp	pp	ADJ
fumecheng-13732	449	53	.	.	PUNCT
fumecheng-13732	450	1	13497	13497	NUM
fumecheng-13732	450	2	-	-	SYM
fumecheng-13732	450	3	13517	13517	NUM
fumecheng-13732	450	4	.	.	PUNCT
fumecheng-13732	451	1	36	36	NUM
fumecheng-13732	451	2	.	.	PUNCT
fumecheng-13732	452	1	kamperman	kamperman	PROPN
fumecheng-13732	452	2	,	,	PUNCT
fumecheng-13732	452	3	m.	m.	NOUN
fumecheng-13732	452	4	,	,	PUNCT
fumecheng-13732	452	5	kroner	kroner	NOUN
fumecheng-13732	452	6	,	,	PUNCT
fumecheng-13732	452	7	e.	e.	PROPN
fumecheng-13732	452	8	,	,	PUNCT
fumecheng-13732	452	9	del	del	PROPN
fumecheng-13732	452	10	campo	campo	PROPN
fumecheng-13732	452	11	,	,	PUNCT
fumecheng-13732	452	12	a.	a.	NOUN
fumecheng-13732	452	13	,	,	PUNCT
fumecheng-13732	452	14	mcmeeking	mcmeeke	VERB
fumecheng-13732	452	15	,	,	PUNCT
fumecheng-13732	452	16	r.m	r.m	PROPN
fumecheng-13732	452	17	.	.	PROPN
fumecheng-13732	452	18	,	,	PUNCT
fumecheng-13732	452	19	arzt	arzt	PROPN
fumecheng-13732	452	20	,	,	PUNCT
fumecheng-13732	452	21	e.	e.	PROPN
fumecheng-13732	452	22	,	,	PUNCT
fumecheng-13732	452	23	2010	2010	NUM
fumecheng-13732	452	24	,	,	PUNCT
fumecheng-13732	452	25	functional	functional	ADJ
fumecheng-13732	452	26	adhesive	adhesive	ADJ
fumecheng-13732	452	27	surfaces	surface	NOUN
fumecheng-13732	452	28	with	with	ADP
fumecheng-13732	452	29	"	"	PUNCT
fumecheng-13732	452	30	gecko	gecko	NOUN
fumecheng-13732	452	31	"	"	PUNCT
fumecheng-13732	452	32	effect	effect	NOUN
fumecheng-13732	452	33	:	:	PUNCT
fumecheng-13732	452	34	the	the	DET
fumecheng-13732	452	35	concept	concept	NOUN
fumecheng-13732	452	36	of	of	ADP
fumecheng-13732	452	37	contact	contact	NOUN
fumecheng-13732	452	38	splitting	splitting	NOUN
fumecheng-13732	452	39	,	,	PUNCT
fumecheng-13732	452	40	advanced	advanced	ADJ
fumecheng-13732	452	41	engineering	engineering	NOUN
fumecheng-13732	452	42	materials	material	NOUN
fumecheng-13732	452	43	,	,	PUNCT
fumecheng-13732	452	44	12(9	12(9	NUM
fumecheng-13732	452	45	)	)	PUNCT
fumecheng-13732	452	46	,	,	PUNCT
fumecheng-13732	452	47	pp	pp	PROPN
fumecheng-13732	452	48	.	.	PUNCT
fumecheng-13732	452	49	335	335	NUM
fumecheng-13732	452	50	-	-	SYM
fumecheng-13732	452	51	348	348	NUM
fumecheng-13732	452	52	.	.	PUNCT
fumecheng-13732	453	1	37	37	NUM
fumecheng-13732	453	2	.	.	PUNCT
fumecheng-13732	454	1	wong	wong	PROPN
fumecheng-13732	454	2	,	,	PUNCT
fumecheng-13732	454	3	t.s	t.s	PROPN
fumecheng-13732	454	4	.	.	PROPN
fumecheng-13732	454	5	,	,	PUNCT
fumecheng-13732	454	6	kang	kang	PROPN
fumecheng-13732	454	7	,	,	PUNCT
fumecheng-13732	454	8	s.h	s.h	PROPN
fumecheng-13732	454	9	.	.	PROPN
fumecheng-13732	454	10	,	,	PUNCT
fumecheng-13732	454	11	tang	tang	PROPN
fumecheng-13732	454	12	,	,	PUNCT
fumecheng-13732	454	13	s.k.y	s.k.y	NOUN
fumecheng-13732	454	14	.	.	PROPN
fumecheng-13732	454	15	,	,	PUNCT
fumecheng-13732	454	16	smythe	smythe	PROPN
fumecheng-13732	454	17	,	,	PUNCT
fumecheng-13732	454	18	e.j	e.j	PROPN
fumecheng-13732	454	19	.	.	PROPN
fumecheng-13732	454	20	,	,	PUNCT
fumecheng-13732	454	21	hatton	hatton	PROPN
fumecheng-13732	454	22	,	,	PUNCT
fumecheng-13732	454	23	b.d	b.d	PROPN
fumecheng-13732	454	24	.	.	PROPN
fumecheng-13732	454	25	,	,	PUNCT
fumecheng-13732	454	26	grinthal	grinthal	NOUN
fumecheng-13732	454	27	,	,	PUNCT
fumecheng-13732	454	28	a.	a.	NOUN
fumecheng-13732	454	29	,	,	PUNCT
fumecheng-13732	454	30	aizenberg	aizenberg	PROPN
fumecheng-13732	454	31	,	,	PUNCT
fumecheng-13732	454	32	j.	j.	PROPN
fumecheng-13732	454	33	,	,	PUNCT
fumecheng-13732	454	34	2011	2011	NUM
fumecheng-13732	454	35	,	,	PUNCT
fumecheng-13732	454	36	bioinspired	bioinspire	VERB
fumecheng-13732	454	37	self	self	NOUN
fumecheng-13732	454	38	-	-	PUNCT
fumecheng-13732	454	39	repairing	repair	VERB
fumecheng-13732	454	40	slippery	slippery	ADJ
fumecheng-13732	454	41	surfaces	surface	NOUN
fumecheng-13732	454	42	with	with	ADP
fumecheng-13732	454	43	pressure	pressure	NOUN
fumecheng-13732	454	44	-	-	PUNCT
fumecheng-13732	454	45	stable	stable	ADJ
fumecheng-13732	454	46	omniphobicity	omniphobicity	NOUN
fumecheng-13732	454	47	,	,	PUNCT
fumecheng-13732	454	48	nature	nature	NOUN
fumecheng-13732	454	49	,	,	PUNCT
fumecheng-13732	454	50	477	477	NUM
fumecheng-13732	454	51	,	,	PUNCT
fumecheng-13732	454	52	pp	pp	ADJ
fumecheng-13732	454	53	.	.	PUNCT
fumecheng-13732	455	1	443	443	NUM
fumecheng-13732	455	2	-	-	NUM
fumecheng-13732	455	3	447	447	NUM
fumecheng-13732	455	4	.	.	PUNCT
fumecheng-13732	456	1	38	38	NUM
fumecheng-13732	456	2	.	.	PUNCT
fumecheng-13732	457	1	xu	xu	PROPN
fumecheng-13732	457	2	,	,	PUNCT
fumecheng-13732	457	3	z.z	z.z	PROPN
fumecheng-13732	457	4	.	.	PROPN
fumecheng-13732	457	5	,	,	PUNCT
fumecheng-13732	457	6	yang	yang	PROPN
fumecheng-13732	457	7	,	,	PUNCT
fumecheng-13732	457	8	q.q	q.q	PROPN
fumecheng-13732	457	9	.	.	PROPN
fumecheng-13732	457	10	,	,	PUNCT
fumecheng-13732	457	11	wang	wang	PROPN
fumecheng-13732	457	12	,	,	PUNCT
fumecheng-13732	457	13	l.b	l.b	PROPN
fumecheng-13732	457	14	.	.	PROPN
fumecheng-13732	457	15	,	,	PUNCT
fumecheng-13732	457	16	guan	guan	PROPN
fumecheng-13732	457	17	,	,	PUNCT
fumecheng-13732	457	18	m.	m.	NOUN
fumecheng-13732	457	19	,	,	PUNCT
fumecheng-13732	457	20	liu	liu	PROPN
fumecheng-13732	457	21	,	,	PUNCT
fumecheng-13732	457	22	z.	z.	PROPN
fumecheng-13732	457	23	,	,	PUNCT
fumecheng-13732	457	24	zhao	zhao	PROPN
fumecheng-13732	457	25	,	,	PUNCT
fumecheng-13732	457	26	j.h	j.h	PROPN
fumecheng-13732	457	27	.	.	PROPN
fumecheng-13732	457	28	,	,	PUNCT
fumecheng-13732	457	29	2024	2024	NUM
fumecheng-13732	457	30	,	,	PUNCT
fumecheng-13732	457	31	biomimetic	biomimetic	ADJ
fumecheng-13732	457	32	microspheres	microsphere	NOUN
fumecheng-13732	457	33	with	with	ADP
fumecheng-13732	457	34	rough	rough	ADJ
fumecheng-13732	457	35	structure	structure	NOUN
fumecheng-13732	457	36	by	by	ADP
fumecheng-13732	457	37	the	the	DET
fumecheng-13732	457	38	geometric	geometric	ADJ
fumecheng-13732	457	39	potential	potential	ADJ
fumecheng-13732	457	40	theory	theory	NOUN
fumecheng-13732	457	41	,	,	PUNCT
fumecheng-13732	457	42	thermal	thermal	ADJ
fumecheng-13732	457	43	science	science	NOUN
fumecheng-13732	457	44	,	,	PUNCT
fumecheng-13732	457	45	28(3a	28(3a	NUM
fumecheng-13732	457	46	)	)	PUNCT
fumecheng-13732	457	47	,	,	PUNCT
fumecheng-13732	457	48	pp	pp	PROPN
fumecheng-13732	457	49	.	.	PUNCT
fumecheng-13732	458	1	2269	2269	NUM
fumecheng-13732	458	2	-	-	SYM
fumecheng-13732	458	3	2275	2275	NUM
fumecheng-13732	458	4	.	.	PUNCT
fumecheng-13732	459	1	39	39	NUM
fumecheng-13732	459	2	.	.	PUNCT
fumecheng-13732	460	1	fan	fan	PROPN
fumecheng-13732	460	2	,	,	PUNCT
fumecheng-13732	460	3	j.	j.	PROPN
fumecheng-13732	460	4	,	,	PUNCT
fumecheng-13732	460	5	zhang	zhang	PROPN
fumecheng-13732	460	6	,	,	PUNCT
fumecheng-13732	460	7	y.r	y.r	PROPN
fumecheng-13732	460	8	.	.	PROPN
fumecheng-13732	460	9	,	,	PUNCT
fumecheng-13732	460	10	liu	liu	PROPN
fumecheng-13732	460	11	,	,	PUNCT
fumecheng-13732	460	12	y.	y.	PROPN
fumecheng-13732	460	13	,	,	PUNCT
fumecheng-13732	460	14	wang	wang	PROPN
fumecheng-13732	460	15	,	,	PUNCT
fumecheng-13732	460	16	y.	y.	PROPN
fumecheng-13732	460	17	,	,	PUNCT
fumecheng-13732	460	18	cao	cao	PROPN
fumecheng-13732	460	19	,	,	PUNCT
fumecheng-13732	460	20	f.	f.	PROPN
fumecheng-13732	460	21	,	,	PUNCT
fumecheng-13732	460	22	yang	yang	PROPN
fumecheng-13732	460	23	,	,	PUNCT
fumecheng-13732	460	24	q.	q.	PROPN
fumecheng-13732	460	25	,	,	PUNCT
fumecheng-13732	460	26	tian	tian	PROPN
fumecheng-13732	460	27	,	,	PUNCT
fumecheng-13732	460	28	f.	f.	PROPN
fumecheng-13732	460	29	,	,	PUNCT
fumecheng-13732	460	30	2019	2019	NUM
fumecheng-13732	460	31	,	,	PUNCT
fumecheng-13732	460	32	explanation	explanation	NOUN
fumecheng-13732	460	33	of	of	ADP
fumecheng-13732	460	34	the	the	DET
fumecheng-13732	460	35	cell	cell	NOUN
fumecheng-13732	460	36	orientation	orientation	NOUN
fumecheng-13732	460	37	in	in	ADP
fumecheng-13732	460	38	a	a	DET
fumecheng-13732	460	39	nanofiber	nanofiber	ADJ
fumecheng-13732	460	40	membrane	membrane	NOUN
fumecheng-13732	460	41	by	by	ADP
fumecheng-13732	460	42	the	the	DET
fumecheng-13732	460	43	geometric	geometric	ADJ
fumecheng-13732	460	44	potential	potential	ADJ
fumecheng-13732	460	45	theory	theory	NOUN
fumecheng-13732	460	46	,	,	PUNCT
fumecheng-13732	460	47	results	result	NOUN
fumecheng-13732	460	48	in	in	ADP
fumecheng-13732	460	49	physics	physics	NOUN
fumecheng-13732	460	50	,	,	PUNCT
fumecheng-13732	460	51	15	15	NUM
fumecheng-13732	460	52	,	,	PUNCT
fumecheng-13732	460	53	102537	102537	NUM
fumecheng-13732	460	54	.	.	PUNCT
fumecheng-13732	461	1	variational	variational	ADJ
fumecheng-13732	461	2	approach	approach	NOUN
fumecheng-13732	461	3	to	to	ADP
fumecheng-13732	461	4	micro	micro	ADJ
fumecheng-13732	461	5	-	-	ADJ
fumecheng-13732	461	6	electro	electro	ADJ
fumecheng-13732	461	7	-	-	PUNCT
fumecheng-13732	461	8	mechanical	mechanical	ADJ
fumecheng-13732	461	9	systems	system	NOUN
fumecheng-13732	461	10	665	665	NUM
fumecheng-13732	461	11	40	40	NUM
fumecheng-13732	461	12	.	.	PUNCT
fumecheng-13732	462	1	tian	tian	PROPN
fumecheng-13732	462	2	,	,	PUNCT
fumecheng-13732	462	3	d.	d.	PROPN
fumecheng-13732	462	4	,	,	PUNCT
fumecheng-13732	462	5	huang	huang	PROPN
fumecheng-13732	462	6	,	,	PUNCT
fumecheng-13732	462	7	z.x	z.x	PROPN
fumecheng-13732	462	8	.	.	PROPN
fumecheng-13732	462	9	,	,	PUNCT
fumecheng-13732	462	10	xiang	xiang	PROPN
fumecheng-13732	462	11	,	,	PUNCT
fumecheng-13732	462	12	j.j	j.j	PROPN
fumecheng-13732	462	13	.	.	PROPN
fumecheng-13732	462	14	,	,	PUNCT
fumecheng-13732	462	15	2024	2024	NUM
fumecheng-13732	462	16	,	,	PUNCT
fumecheng-13732	462	17	a	a	DET
fumecheng-13732	462	18	modeling	modeling	NOUN
fumecheng-13732	462	19	and	and	CCONJ
fumecheng-13732	462	20	experimental	experimental	ADJ
fumecheng-13732	462	21	analysis	analysis	NOUN
fumecheng-13732	462	22	of	of	ADP
fumecheng-13732	462	23	fractal	fractal	ADJ
fumecheng-13732	462	24	geometric	geometric	ADJ
fumecheng-13732	462	25	potential	potential	ADJ
fumecheng-13732	462	26	mems	mem	NOUN
fumecheng-13732	462	27	in	in	ADP
fumecheng-13732	462	28	the	the	DET
fumecheng-13732	462	29	context	context	NOUN
fumecheng-13732	462	30	of	of	ADP
fumecheng-13732	462	31	the	the	DET
fumecheng-13732	462	32	development	development	NOUN
fumecheng-13732	462	33	of	of	ADP
fumecheng-13732	462	34	6	6	NUM
fumecheng-13732	462	35	g	g	NOUN
fumecheng-13732	462	36	and	and	CCONJ
fumecheng-13732	462	37	beyond	beyond	ADV
fumecheng-13732	462	38	,	,	PUNCT
fumecheng-13732	462	39	fractals	fractal	NOUN
fumecheng-13732	462	40	,	,	PUNCT
fumecheng-13732	462	41	32(6	32(6	NUM
fumecheng-13732	462	42	)	)	PUNCT
fumecheng-13732	462	43	,	,	PUNCT
fumecheng-13732	462	44	2450124	2450124	NUM
fumecheng-13732	462	45	.	.	PUNCT
fumecheng-13732	463	1	41	41	NUM
fumecheng-13732	463	2	.	.	PUNCT
fumecheng-13732	463	3	ain	ain	PROPN
fumecheng-13732	463	4	,	,	PUNCT
fumecheng-13732	463	5	q.t	q.t	PROPN
fumecheng-13732	463	6	.	.	PROPN
fumecheng-13732	463	7	,	,	PUNCT
fumecheng-13732	463	8	sathiyaraj	sathiyaraj	VERB
fumecheng-13732	463	9	,	,	PUNCT
fumecheng-13732	463	10	t.	t.	PROPN
fumecheng-13732	463	11	,	,	PUNCT
fumecheng-13732	463	12	karim	karim	PROPN
fumecheng-13732	463	13	,	,	PUNCT
fumecheng-13732	463	14	s.	s.	PROPN
fumecheng-13732	463	15	,	,	PUNCT
fumecheng-13732	463	16	nadeem	nadeem	PROPN
fumecheng-13732	463	17	,	,	PUNCT
fumecheng-13732	463	18	m.	m.	NOUN
fumecheng-13732	463	19	,	,	PUNCT
fumecheng-13732	463	20	mwanakatwe	mwanakatwe	PROPN
fumecheng-13732	463	21	,	,	PUNCT
fumecheng-13732	463	22	p.k	p.k	PROPN
fumecheng-13732	463	23	.	.	PROPN
fumecheng-13732	463	24	,	,	PUNCT
fumecheng-13732	463	25	2022	2022	NUM
fumecheng-13732	463	26	,	,	PUNCT
fumecheng-13732	463	27	abc	abc	PROPN
fumecheng-13732	463	28	fractional	fractional	PROPN
fumecheng-13732	463	29	derivative	derivative	NOUN
fumecheng-13732	463	30	for	for	ADP
fumecheng-13732	463	31	the	the	DET
fumecheng-13732	463	32	alcohol	alcohol	NOUN
fumecheng-13732	463	33	drinking	drinking	NOUN
fumecheng-13732	463	34	model	model	NOUN
fumecheng-13732	463	35	using	use	VERB
fumecheng-13732	463	36	two	two	NUM
fumecheng-13732	463	37	-	-	PUNCT
fumecheng-13732	463	38	scale	scale	NOUN
fumecheng-13732	463	39	fractal	fractal	ADJ
fumecheng-13732	463	40	dimension	dimension	NOUN
fumecheng-13732	463	41	,	,	PUNCT
fumecheng-13732	463	42	complexity	complexity	NOUN
fumecheng-13732	463	43	,	,	PUNCT
fumecheng-13732	463	44	2022	2022	NUM
fumecheng-13732	463	45	,	,	PUNCT
fumecheng-13732	463	46	8531858	8531858	NUM
fumecheng-13732	463	47	.	.	PUNCT
fumecheng-13732	464	1	42	42	NUM
fumecheng-13732	464	2	.	.	PUNCT
fumecheng-13732	465	1	zhang	zhang	PROPN
fumecheng-13732	465	2	,	,	PUNCT
fumecheng-13732	465	3	y.r	y.r	PROPN
fumecheng-13732	465	4	.	.	PROPN
fumecheng-13732	465	5	,	,	PUNCT
fumecheng-13732	465	6	anjum	anjum	PROPN
fumecheng-13732	465	7	,	,	PUNCT
fumecheng-13732	465	8	n.	n.	PROPN
fumecheng-13732	465	9	,	,	PUNCT
fumecheng-13732	465	10	tian	tian	PROPN
fumecheng-13732	465	11	,	,	PUNCT
fumecheng-13732	465	12	d.	d.	PROPN
fumecheng-13732	465	13	,	,	PUNCT
fumecheng-13732	465	14	alsolami	alsolami	PROPN
fumecheng-13732	465	15	,	,	PUNCT
fumecheng-13732	465	16	a.a	a.a	PROPN
fumecheng-13732	465	17	.	.	PROPN
fumecheng-13732	465	18	,	,	PUNCT
fumecheng-13732	465	19	2024	2024	NUM
fumecheng-13732	465	20	,	,	PUNCT
fumecheng-13732	465	21	fast	fast	ADJ
fumecheng-13732	465	22	and	and	CCONJ
fumecheng-13732	465	23	accurate	accurate	ADJ
fumecheng-13732	465	24	population	population	NOUN
fumecheng-13732	465	25	forecasting	forecasting	NOUN
fumecheng-13732	465	26	with	with	ADP
fumecheng-13732	465	27	two	two	NUM
fumecheng-13732	465	28	-	-	PUNCT
fumecheng-13732	465	29	scale	scale	NOUN
fumecheng-13732	465	30	fractal	fractal	ADJ
fumecheng-13732	465	31	population	population	NOUN
fumecheng-13732	465	32	dynamics	dynamic	NOUN
fumecheng-13732	465	33	and	and	CCONJ
fumecheng-13732	465	34	its	its	PRON
fumecheng-13732	465	35	application	application	NOUN
fumecheng-13732	465	36	to	to	ADP
fumecheng-13732	465	37	population	population	NOUN
fumecheng-13732	465	38	economics	economic	NOUN
fumecheng-13732	465	39	,	,	PUNCT
fumecheng-13732	465	40	fractals	fractal	NOUN
fumecheng-13732	465	41	,	,	PUNCT
fumecheng-13732	465	42	32(5	32(5	NOUN
fumecheng-13732	465	43	)	)	PUNCT
fumecheng-13732	465	44	,	,	PUNCT
fumecheng-13732	465	45	2450082	2450082	NUM
fumecheng-13732	465	46	.	.	PUNCT
fumecheng-13732	466	1	43	43	NUM
fumecheng-13732	466	2	.	.	PUNCT
fumecheng-13732	466	3	rahmani	rahmani	PROPN
fumecheng-13732	466	4	,	,	PUNCT
fumecheng-13732	466	5	m.	m.	NOUN
fumecheng-13732	466	6	,	,	PUNCT
fumecheng-13732	466	7	redkar	redkar	PRON
fumecheng-13732	466	8	,	,	PUNCT
fumecheng-13732	466	9	s.	s.	PROPN
fumecheng-13732	466	10	,	,	PUNCT
fumecheng-13732	466	11	2023	2023	NUM
fumecheng-13732	466	12	,	,	PUNCT
fumecheng-13732	466	13	fractional	fractional	ADJ
fumecheng-13732	466	14	robust	robust	ADJ
fumecheng-13732	466	15	data	data	NOUN
fumecheng-13732	466	16	-	-	PUNCT
fumecheng-13732	466	17	driven	drive	VERB
fumecheng-13732	466	18	control	control	NOUN
fumecheng-13732	466	19	of	of	ADP
fumecheng-13732	466	20	nonlinear	nonlinear	ADJ
fumecheng-13732	466	21	mems	mem	NOUN
fumecheng-13732	466	22	gyroscope	gyroscope	NOUN
fumecheng-13732	466	23	,	,	PUNCT
fumecheng-13732	466	24	nonlinear	nonlinear	ADJ
fumecheng-13732	466	25	dynamics	dynamic	NOUN
fumecheng-13732	466	26	,	,	PUNCT
fumecheng-13732	466	27	111	111	NUM
fumecheng-13732	466	28	,	,	PUNCT
fumecheng-13732	466	29	pp	pp	ADJ
fumecheng-13732	466	30	.	.	PUNCT
fumecheng-13732	466	31	19901	19901	NUM
fumecheng-13732	466	32	-	-	SYM
fumecheng-13732	466	33	19910	19910	NUM
fumecheng-13732	466	34	.	.	PUNCT
fumecheng-13732	467	1	44	44	NUM
fumecheng-13732	467	2	.	.	PUNCT
fumecheng-13732	467	3	drosinou	drosinou	NOUN
fumecheng-13732	467	4	,	,	PUNCT
fumecheng-13732	467	5	o.	o.	PROPN
fumecheng-13732	467	6	,	,	PUNCT
fumecheng-13732	467	7	nikolopoulos	nikolopoulos	PROPN
fumecheng-13732	467	8	,	,	PUNCT
fumecheng-13732	467	9	c.v	c.v	PROPN
fumecheng-13732	467	10	.	.	PROPN
fumecheng-13732	467	11	,	,	PUNCT
fumecheng-13732	467	12	matzavinos	matzavinos	PROPN
fumecheng-13732	467	13	,	,	PUNCT
fumecheng-13732	467	14	a.	a.	NOUN
fumecheng-13732	467	15	,	,	PUNCT
fumecheng-13732	467	16	kavallaris	kavallaris	NOUN
fumecheng-13732	467	17	,	,	PUNCT
fumecheng-13732	467	18	n.	n.	NOUN
fumecheng-13732	467	19	,	,	PUNCT
fumecheng-13732	467	20	2023	2023	NUM
fumecheng-13732	467	21	,	,	PUNCT
fumecheng-13732	467	22	a	a	DET
fumecheng-13732	467	23	stochastic	stochastic	ADJ
fumecheng-13732	467	24	parabolic	parabolic	NOUN
fumecheng-13732	467	25	model	model	NOUN
fumecheng-13732	467	26	of	of	ADP
fumecheng-13732	467	27	mems	mem	NOUN
fumecheng-13732	467	28	driven	drive	VERB
fumecheng-13732	467	29	by	by	ADP
fumecheng-13732	467	30	fractional	fractional	ADJ
fumecheng-13732	467	31	brownian	brownian	PROPN
fumecheng-13732	467	32	motion	motion	NOUN
fumecheng-13732	467	33	,	,	PUNCT
fumecheng-13732	467	34	journal	journal	NOUN
fumecheng-13732	467	35	of	of	ADP
fumecheng-13732	467	36	mathematical	mathematical	ADJ
fumecheng-13732	467	37	biology	biology	NOUN
fumecheng-13732	467	38	,	,	PUNCT
fumecheng-13732	467	39	86(5	86(5	PROPN
fumecheng-13732	467	40	)	)	PUNCT
fumecheng-13732	467	41	,	,	PUNCT
fumecheng-13732	467	42	73	73	NUM
fumecheng-13732	467	43	.	.	PUNCT
fumecheng-13732	468	1	45	45	NUM
fumecheng-13732	468	2	.	.	PUNCT
fumecheng-13732	469	1	luo	luo	PROPN
fumecheng-13732	469	2	,	,	PUNCT
fumecheng-13732	469	3	s.h	s.h	PROPN
fumecheng-13732	469	4	.	.	PROPN
fumecheng-13732	469	5	,	,	PUNCT
fumecheng-13732	469	6	li	li	PROPN
fumecheng-13732	469	7	,	,	PUNCT
fumecheng-13732	469	8	s.b	s.b	PROPN
fumecheng-13732	469	9	.	.	PROPN
fumecheng-13732	469	10	,	,	PUNCT
fumecheng-13732	469	11	tajaddodianfar	tajaddodianfar	ADV
fumecheng-13732	469	12	,	,	PUNCT
fumecheng-13732	469	13	f.	f.	PROPN
fumecheng-13732	469	14	,	,	PUNCT
fumecheng-13732	469	15	2018	2018	NUM
fumecheng-13732	469	16	,	,	PUNCT
fumecheng-13732	469	17	adaptive	adaptive	ADJ
fumecheng-13732	469	18	chaos	chaos	NOUN
fumecheng-13732	469	19	control	control	NOUN
fumecheng-13732	469	20	of	of	ADP
fumecheng-13732	469	21	the	the	DET
fumecheng-13732	469	22	fractional	fractional	ADJ
fumecheng-13732	469	23	-	-	PUNCT
fumecheng-13732	469	24	order	order	NOUN
fumecheng-13732	469	25	arch	arch	ADJ
fumecheng-13732	469	26	mems	mem	NOUN
fumecheng-13732	469	27	resonator	resonator	NOUN
fumecheng-13732	469	28	,	,	PUNCT
fumecheng-13732	469	29	nonlinear	nonlinear	ADJ
fumecheng-13732	469	30	dynamics	dynamic	NOUN
fumecheng-13732	469	31	,	,	PUNCT
fumecheng-13732	469	32	91(1	91(1	NUM
fumecheng-13732	469	33	)	)	PUNCT
fumecheng-13732	469	34	,	,	PUNCT
fumecheng-13732	469	35	pp	pp	ADJ
fumecheng-13732	469	36	.	.	PUNCT
fumecheng-13732	470	1	539	539	NUM
fumecheng-13732	470	2	-	-	SYM
fumecheng-13732	470	3	547	547	NUM
fumecheng-13732	470	4	.	.	NUM
fumecheng-13732	471	1	46	46	NUM
fumecheng-13732	471	2	.	.	PUNCT
fumecheng-13732	471	3	jornet	jornet	NOUN
fumecheng-13732	471	4	,	,	PUNCT
fumecheng-13732	471	5	m.	m.	NOUN
fumecheng-13732	471	6	,	,	PUNCT
fumecheng-13732	471	7	nieto	nieto	PROPN
fumecheng-13732	471	8	,	,	PUNCT
fumecheng-13732	471	9	j.j	j.j	PROPN
fumecheng-13732	471	10	.	.	PROPN
fumecheng-13732	471	11	,	,	PUNCT
fumecheng-13732	471	12	2024	2024	NUM
fumecheng-13732	471	13	,	,	PUNCT
fumecheng-13732	471	14	properties	property	NOUN
fumecheng-13732	471	15	of	of	ADP
fumecheng-13732	471	16	a	a	DET
fumecheng-13732	471	17	new	new	ADJ
fumecheng-13732	471	18	generalized	generalize	VERB
fumecheng-13732	471	19	caputo	caputo	PROPN
fumecheng-13732	471	20	fabrizio	fabrizio	PROPN
fumecheng-13732	471	21	fractional	fractional	PROPN
fumecheng-13732	471	22	derivative	derivative	PROPN
fumecheng-13732	471	23	,	,	PUNCT
fumecheng-13732	471	24	journal	journal	NOUN
fumecheng-13732	471	25	of	of	ADP
fumecheng-13732	471	26	applied	apply	VERB
fumecheng-13732	471	27	analysis	analysis	NOUN
fumecheng-13732	471	28	&	&	CCONJ
fumecheng-13732	471	29	computation	computation	NOUN
fumecheng-13732	471	30	,	,	PUNCT
fumecheng-13732	471	31	14(6	14(6	NOUN
fumecheng-13732	471	32	)	)	PUNCT
fumecheng-13732	471	33	,	,	PUNCT
fumecheng-13732	471	34	pp	pp	ADP
fumecheng-13732	471	35	.	.	PUNCT
fumecheng-13732	472	1	3520	3520	NUM
fumecheng-13732	472	2	-	-	SYM
fumecheng-13732	472	3	3538	3538	NUM
fumecheng-13732	472	4	.	.	PUNCT
fumecheng-13732	473	1	47	47	NUM
fumecheng-13732	473	2	.	.	PUNCT
fumecheng-13732	474	1	janardhanan	janardhanan	PROPN
fumecheng-13732	474	2	,	,	PUNCT
fumecheng-13732	474	3	g.	g.	PROPN
fumecheng-13732	474	4	,	,	PUNCT
fumecheng-13732	474	5	mani	mani	PROPN
fumecheng-13732	474	6	,	,	PUNCT
fumecheng-13732	474	7	g.	g.	PROPN
fumecheng-13732	474	8	,	,	PUNCT
fumecheng-13732	474	9	santina	santina	PROPN
fumecheng-13732	474	10	,	,	PUNCT
fumecheng-13732	474	11	d.	d.	PROPN
fumecheng-13732	474	12	,	,	PUNCT
fumecheng-13732	474	13	mlaiki	mlaiki	PROPN
fumecheng-13732	474	14	,	,	PUNCT
fumecheng-13732	474	15	n.	n.	NOUN
fumecheng-13732	474	16	,	,	PUNCT
fumecheng-13732	474	17	2025	2025	NUM
fumecheng-13732	474	18	,	,	PUNCT
fumecheng-13732	474	19	existence	existence	NOUN
fumecheng-13732	474	20	and	and	CCONJ
fumecheng-13732	474	21	uniqueness	uniqueness	ADJ
fumecheng-13732	474	22	theorems	theorem	NOUN
fumecheng-13732	474	23	for	for	ADP
fumecheng-13732	474	24	nonlinear	nonlinear	ADJ
fumecheng-13732	474	25	coupled	couple	VERB
fumecheng-13732	474	26	boundary	boundary	ADJ
fumecheng-13732	474	27	value	value	NOUN
fumecheng-13732	474	28	problem	problem	NOUN
fumecheng-13732	474	29	of	of	ADP
fumecheng-13732	474	30	the	the	DET
fumecheng-13732	474	31	abc	abc	PROPN
fumecheng-13732	474	32	fractional	fractional	PROPN
fumecheng-13732	474	33	differential	differential	PROPN
fumecheng-13732	474	34	equation	equation	NOUN
fumecheng-13732	474	35	,	,	PUNCT
fumecheng-13732	474	36	journal	journal	NOUN
fumecheng-13732	474	37	of	of	ADP
fumecheng-13732	474	38	mathematics	mathematic	NOUN
fumecheng-13732	474	39	and	and	CCONJ
fumecheng-13732	474	40	computer	computer	NOUN
fumecheng-13732	474	41	science	science	NOUN
fumecheng-13732	474	42	–	–	PUNCT
fumecheng-13732	474	43	jmcs	jmcs	NOUN
fumecheng-13732	474	44	,	,	PUNCT
fumecheng-13732	474	45	37(3	37(3	NUM
fumecheng-13732	474	46	)	)	PUNCT
fumecheng-13732	474	47	,	,	PUNCT
fumecheng-13732	474	48	pp	pp	PROPN
fumecheng-13732	474	49	.	.	PUNCT
fumecheng-13732	475	1	297	297	NUM
fumecheng-13732	475	2	-	-	SYM
fumecheng-13732	475	3	318	318	NUM
fumecheng-13732	475	4	.	.	PUNCT
fumecheng-13732	476	1	48	48	NUM
fumecheng-13732	476	2	.	.	PUNCT
fumecheng-13732	477	1	redhwan	redhwan	PROPN
fumecheng-13732	477	2	,	,	PUNCT
fumecheng-13732	477	3	s.s	s.s	PROPN
fumecheng-13732	477	4	.	.	PROPN
fumecheng-13732	477	5	,	,	PUNCT
fumecheng-13732	477	6	han	han	PROPN
fumecheng-13732	477	7	,	,	PUNCT
fumecheng-13732	477	8	m.a	m.a	PROPN
fumecheng-13732	477	9	.	.	PROPN
fumecheng-13732	477	10	,	,	PUNCT
fumecheng-13732	477	11	almalahi	almalahi	PROPN
fumecheng-13732	477	12	,	,	PUNCT
fumecheng-13732	477	13	m.a	m.a	PROPN
fumecheng-13732	477	14	.	.	PROPN
fumecheng-13732	477	15	,	,	PUNCT
fumecheng-13732	477	16	alyami	alyami	NOUN
fumecheng-13732	477	17	,	,	PUNCT
fumecheng-13732	477	18	m.a	m.a	PROPN
fumecheng-13732	477	19	.	.	PROPN
fumecheng-13732	477	20	,	,	PUNCT
fumecheng-13732	477	21	alsulami	alsulami	NOUN
fumecheng-13732	477	22	,	,	PUNCT
fumecheng-13732	477	23	m.	m.	NOUN
fumecheng-13732	477	24	,	,	PUNCT
fumecheng-13732	477	25	alghamdi	alghamdi	NOUN
fumecheng-13732	477	26	,	,	PUNCT
fumecheng-13732	477	27	n.	n.	NOUN
fumecheng-13732	477	28	,	,	PUNCT
fumecheng-13732	477	29	2024	2024	NUM
fumecheng-13732	477	30	,	,	PUNCT
fumecheng-13732	477	31	piecewise	piecewise	NOUN
fumecheng-13732	477	32	implicit	implicit	ADJ
fumecheng-13732	477	33	coupled	couple	VERB
fumecheng-13732	477	34	system	system	NOUN
fumecheng-13732	477	35	under	under	ADP
fumecheng-13732	477	36	abc	abc	PROPN
fumecheng-13732	477	37	fractional	fractional	PROPN
fumecheng-13732	477	38	differential	differential	NOUN
fumecheng-13732	477	39	equations	equation	NOUN
fumecheng-13732	477	40	with	with	ADP
fumecheng-13732	477	41	variable	variable	ADJ
fumecheng-13732	477	42	order	order	NOUN
fumecheng-13732	477	43	,	,	PUNCT
fumecheng-13732	477	44	aims	aim	VERB
fumecheng-13732	477	45	mathematics	mathematic	NOUN
fumecheng-13732	477	46	,	,	PUNCT
fumecheng-13732	477	47	9(6	9(6	NUM
fumecheng-13732	477	48	)	)	PUNCT
fumecheng-13732	477	49	,	,	PUNCT
fumecheng-13732	477	50	pp	pp	PROPN
fumecheng-13732	477	51	.	.	PUNCT
fumecheng-13732	478	1	15303	15303	NUM
fumecheng-13732	478	2	-	-	SYM
fumecheng-13732	478	3	15324	15324	NUM
fumecheng-13732	478	4	.	.	PUNCT
fumecheng-13732	479	1	49	49	NUM
fumecheng-13732	479	2	.	.	PUNCT
fumecheng-13732	480	1	liu	liu	PROPN
fumecheng-13732	480	2	,	,	PUNCT
fumecheng-13732	480	3	d.	d.	PROPN
fumecheng-13732	480	4	,	,	PUNCT
fumecheng-13732	480	5	tian	tian	PROPN
fumecheng-13732	480	6	,	,	PUNCT
fumecheng-13732	480	7	x.	x.	PROPN
fumecheng-13732	480	8	,	,	PUNCT
fumecheng-13732	480	9	bai	bai	PROPN
fumecheng-13732	480	10	,	,	PUNCT
fumecheng-13732	480	11	j.	j.	PROPN
fumecheng-13732	480	12	,	,	PUNCT
fumecheng-13732	480	13	wang	wang	PROPN
fumecheng-13732	480	14	,	,	PUNCT
fumecheng-13732	480	15	s.c	s.c	PROPN
fumecheng-13732	480	16	.	.	PROPN
fumecheng-13732	480	17	,	,	PUNCT
fumecheng-13732	480	18	dai	dai	PROPN
fumecheng-13732	480	19	,	,	PUNCT
fumecheng-13732	480	20	s.l	s.l	PROPN
fumecheng-13732	480	21	.	.	PROPN
fumecheng-13732	480	22	,	,	PUNCT
fumecheng-13732	480	23	wang	wang	PROPN
fumecheng-13732	480	24	,	,	PUNCT
fumecheng-13732	480	25	y.	y.	PROPN
fumecheng-13732	480	26	,	,	PUNCT
fumecheng-13732	480	27	wang	wang	PROPN
fumecheng-13732	480	28	,	,	PUNCT
fumecheng-13732	480	29	z.r	z.r	PROPN
fumecheng-13732	480	30	.	.	PROPN
fumecheng-13732	480	31	,	,	PUNCT
fumecheng-13732	480	32	zhang	zhang	PROPN
fumecheng-13732	480	33	,	,	PUNCT
fumecheng-13732	480	34	s.m	s.m	PROPN
fumecheng-13732	480	35	.	.	PROPN
fumecheng-13732	480	36	,	,	PUNCT
fumecheng-13732	480	37	2024	2024	NUM
fumecheng-13732	480	38	,	,	PUNCT
fumecheng-13732	480	39	a	a	DET
fumecheng-13732	480	40	wearable	wearable	ADJ
fumecheng-13732	480	41	in	in	ADP
fumecheng-13732	480	42	-	-	PUNCT
fumecheng-13732	480	43	sensor	sensor	NOUN
fumecheng-13732	480	44	computing	computing	NOUN
fumecheng-13732	480	45	platform	platform	NOUN
fumecheng-13732	480	46	based	base	VERB
fumecheng-13732	480	47	on	on	ADP
fumecheng-13732	480	48	stretchable	stretchable	ADJ
fumecheng-13732	480	49	organic	organic	ADJ
fumecheng-13732	480	50	electrochemical	electrochemical	ADJ
fumecheng-13732	480	51	transistors	transistor	NOUN
fumecheng-13732	480	52	,	,	PUNCT
fumecheng-13732	480	53	nature	nature	NOUN
fumecheng-13732	480	54	electronics	electronic	NOUN
fumecheng-13732	480	55	,	,	PUNCT
fumecheng-13732	480	56	7	7	NUM
fumecheng-13732	480	57	,	,	PUNCT
fumecheng-13732	480	58	pp	pp	ADJ
fumecheng-13732	480	59	.	.	PUNCT
fumecheng-13732	481	1	1176–1185	1176–1185	NUM
fumecheng-13732	481	2	.	.	X
fumecheng-13732	482	1	50	50	NUM
fumecheng-13732	482	2	.	.	PUNCT
fumecheng-13732	483	1	he	he	PRON
fumecheng-13732	483	2	,	,	PUNCT
fumecheng-13732	483	3	j.h	j.h	PROPN
fumecheng-13732	483	4	.	.	PROPN
fumecheng-13732	483	5	,	,	PUNCT
fumecheng-13732	483	6	bai	bai	PROPN
fumecheng-13732	483	7	,	,	PUNCT
fumecheng-13732	483	8	q.m	q.m	PROPN
fumecheng-13732	483	9	.	.	PROPN
fumecheng-13732	483	10	,	,	PUNCT
fumecheng-13732	483	11	luo	luo	PROPN
fumecheng-13732	483	12	,	,	PUNCT
fumecheng-13732	483	13	y.c	y.c	PROPN
fumecheng-13732	483	14	.	.	PROPN
fumecheng-13732	483	15	,	,	PUNCT
fumecheng-13732	483	16	kuangaliyeva	kuangaliyeva	PROPN
fumecheng-13732	483	17	,	,	PUNCT
fumecheng-13732	483	18	d.	d.	PROPN
fumecheng-13732	483	19	,	,	PUNCT
fumecheng-13732	483	20	ellis	ellis	PROPN
fumecheng-13732	483	21	,	,	PUNCT
fumecheng-13732	483	22	g.	g.	PROPN
fumecheng-13732	483	23	,	,	PUNCT
fumecheng-13732	483	24	yessetov	yessetov	NOUN
fumecheng-13732	483	25	,	,	PUNCT
fumecheng-13732	483	26	y.	y.	NOUN
fumecheng-13732	483	27	,	,	PUNCT
fumecheng-13732	483	28	skrzypacz	skrzypacz	NOUN
fumecheng-13732	483	29	,	,	PUNCT
fumecheng-13732	483	30	p.	p.	NOUN
fumecheng-13732	483	31	,	,	PUNCT
fumecheng-13732	483	32	2025	2025	NUM
fumecheng-13732	483	33	,	,	PUNCT
fumecheng-13732	483	34	modeling	modeling	NOUN
fumecheng-13732	483	35	and	and	CCONJ
fumecheng-13732	483	36	numerical	numerical	ADJ
fumecheng-13732	483	37	analysis	analysis	NOUN
fumecheng-13732	483	38	for	for	ADP
fumecheng-13732	483	39	mems	mem	NOUN
fumecheng-13732	483	40	graphene	graphene	NOUN
fumecheng-13732	483	41	resonator	resonator	NOUN
fumecheng-13732	483	42	,	,	PUNCT
fumecheng-13732	483	43	frontiers	frontier	NOUN
fumecheng-13732	483	44	in	in	ADP
fumecheng-13732	483	45	physics	physics	NOUN
fumecheng-13732	483	46	,	,	PUNCT
fumecheng-13732	483	47	13	13	NUM
fumecheng-13732	483	48	,	,	PUNCT
fumecheng-13732	483	49	1551969	1551969	NUM
fumecheng-13732	483	50	.	.	PUNCT