id	sid	tid	token	lemma	pos
fumecheng-7188	1	1	7188	7188	NUM
fumecheng-7188	1	2	facta	facta	PROPN
fumecheng-7188	1	3	universitatis	universitatis	PROPN
fumecheng-7188	1	4	series	series	NOUN
fumecheng-7188	1	5	:	:	PUNCT
fumecheng-7188	1	6	mechanical	mechanical	ADJ
fumecheng-7188	1	7	engineering	engineering	NOUN
fumecheng-7188	1	8	vol	vol	NOUN
fumecheng-7188	1	9	.	.	PROPN
fumecheng-7188	1	10	21	21	NUM
fumecheng-7188	1	11	,	,	PUNCT
fumecheng-7188	1	12	no	no	DET
fumecheng-7188	1	13	1	1	NUM
fumecheng-7188	1	14	,	,	PUNCT
fumecheng-7188	1	15	2023	2023	NUM
fumecheng-7188	1	16	,	,	PUNCT
fumecheng-7188	1	17	pp	pp	ADJ
fumecheng-7188	1	18	.	.	PUNCT
fumecheng-7188	2	1	121	121	NUM
fumecheng-7188	2	2	135	135	NUM
fumecheng-7188	2	3	https://doi.org/10.22190/fume210507063	https://doi.org/10.22190/fume210507063	NOUN
fumecheng-7188	2	4	m	m	NOUN
fumecheng-7188	2	5	©	©	PROPN
fumecheng-7188	2	6	2023	2023	NUM
fumecheng-7188	2	7	by	by	ADP
fumecheng-7188	2	8	university	university	PROPN
fumecheng-7188	2	9	of	of	ADP
fumecheng-7188	2	10	niš	niš	PROPN
fumecheng-7188	2	11	,	,	PUNCT
fumecheng-7188	2	12	serbia	serbia	PROPN
fumecheng-7188	2	13	|	|	ADV
fumecheng-7188	2	14	creative	creative	ADJ
fumecheng-7188	2	15	commons	common	NOUN
fumecheng-7188	2	16	license	license	NOUN
fumecheng-7188	2	17	:	:	PUNCT
fumecheng-7188	2	18	cc	cc	VERB
fumecheng-7188	2	19	by	by	ADP
fumecheng-7188	2	20	-	-	PUNCT
fumecheng-7188	2	21	nc	nc	VERB
fumecheng-7188	2	22	-	-	PUNCT
fumecheng-7188	2	23	nd	nd	ADV
fumecheng-7188	2	24	original	original	ADJ
fumecheng-7188	2	25	scientific	scientific	ADJ
fumecheng-7188	2	26	paper	paper	NUM
fumecheng-7188	2	27	accuracy	accuracy	NOUN
fumecheng-7188	2	28	analysis	analysis	NOUN
fumecheng-7188	2	29	of	of	ADP
fumecheng-7188	2	30	the	the	DET
fumecheng-7188	2	31	curved	curved	ADJ
fumecheng-7188	2	32	profile	profile	PROPN
fumecheng-7188	2	33	measurement	measurement	NOUN
fumecheng-7188	2	34	with	with	ADP
fumecheng-7188	2	35	cmm	cmm	NOUN
fumecheng-7188	2	36	:	:	PUNCT
fumecheng-7188	2	37	a	a	DET
fumecheng-7188	2	38	case	case	NOUN
fumecheng-7188	2	39	study	study	NOUN
fumecheng-7188	2	40	tomasz	tomasz	PROPN
fumecheng-7188	2	41	mazur1	mazur1	PROPN
fumecheng-7188	2	42	,	,	PUNCT
fumecheng-7188	2	43	miroslaw	miroslaw	NOUN
fumecheng-7188	2	44	rucki1	rucki1	PROPN
fumecheng-7188	2	45	,	,	PUNCT
fumecheng-7188	2	46	yuriy	yuriy	PROPN
fumecheng-7188	2	47	gutsalenko2	gutsalenko2	PROPN
fumecheng-7188	3	1	1kazimierz	1kazimierz	NUM
fumecheng-7188	3	2	pulaski	pulaski	PROPN
fumecheng-7188	3	3	university	university	PROPN
fumecheng-7188	3	4	of	of	ADP
fumecheng-7188	3	5	technology	technology	NOUN
fumecheng-7188	3	6	and	and	CCONJ
fumecheng-7188	3	7	humanities	humanity	NOUN
fumecheng-7188	3	8	in	in	ADP
fumecheng-7188	3	9	radom	radom	NOUN
fumecheng-7188	3	10	,	,	PUNCT
fumecheng-7188	3	11	poland	poland	PROPN
fumecheng-7188	3	12	2national	2national	NUM
fumecheng-7188	3	13	technical	technical	ADJ
fumecheng-7188	3	14	university	university	NOUN
fumecheng-7188	3	15	“	"	PUNCT
fumecheng-7188	3	16	kharkiv	kharkiv	PROPN
fumecheng-7188	3	17	polytechnic	polytechnic	PROPN
fumecheng-7188	3	18	institute	institute	PROPN
fumecheng-7188	3	19	”	"	PUNCT
fumecheng-7188	3	20	,	,	PUNCT
fumecheng-7188	3	21	kharkiv	kharkiv	PROPN
fumecheng-7188	3	22	,	,	PUNCT
fumecheng-7188	3	23	ukraine	ukraine	PROPN
fumecheng-7188	3	24	abstract	abstract	NOUN
fumecheng-7188	3	25	.	.	PUNCT
fumecheng-7188	4	1	in	in	ADP
fumecheng-7188	4	2	the	the	DET
fumecheng-7188	4	3	paper	paper	NOUN
fumecheng-7188	4	4	,	,	PUNCT
fumecheng-7188	4	5	analysis	analysis	NOUN
fumecheng-7188	4	6	of	of	ADP
fumecheng-7188	4	7	the	the	DET
fumecheng-7188	4	8	curved	curved	ADJ
fumecheng-7188	4	9	profile	profile	NOUN
fumecheng-7188	4	10	measurement	measurement	NOUN
fumecheng-7188	4	11	accuracy	accuracy	NOUN
fumecheng-7188	4	12	is	be	AUX
fumecheng-7188	4	13	described	describe	VERB
fumecheng-7188	4	14	.	.	PUNCT
fumecheng-7188	5	1	since	since	SCONJ
fumecheng-7188	5	2	there	there	PRON
fumecheng-7188	5	3	was	be	VERB
fumecheng-7188	5	4	no	no	DET
fumecheng-7188	5	5	cad	cad	NOUN
fumecheng-7188	5	6	model	model	NOUN
fumecheng-7188	5	7	or	or	CCONJ
fumecheng-7188	5	8	other	other	ADJ
fumecheng-7188	5	9	reference	reference	NOUN
fumecheng-7188	5	10	profile	profile	NOUN
fumecheng-7188	5	11	for	for	ADP
fumecheng-7188	5	12	the	the	DET
fumecheng-7188	5	13	measured	measured	ADJ
fumecheng-7188	5	14	detail	detail	NOUN
fumecheng-7188	5	15	,	,	PUNCT
fumecheng-7188	5	16	the	the	DET
fumecheng-7188	5	17	first	first	ADJ
fumecheng-7188	5	18	step	step	NOUN
fumecheng-7188	5	19	was	be	AUX
fumecheng-7188	5	20	to	to	PART
fumecheng-7188	5	21	generate	generate	VERB
fumecheng-7188	5	22	the	the	DET
fumecheng-7188	5	23	reference	reference	NOUN
fumecheng-7188	5	24	contour	contour	NOUN
fumecheng-7188	5	25	of	of	ADP
fumecheng-7188	5	26	the	the	DET
fumecheng-7188	5	27	cam	cam	NOUN
fumecheng-7188	5	28	using	use	VERB
fumecheng-7188	5	29	the	the	DET
fumecheng-7188	5	30	technical	technical	ADJ
fumecheng-7188	5	31	drawing	drawing	NOUN
fumecheng-7188	5	32	and	and	CCONJ
fumecheng-7188	5	33	tolerance	tolerance	NOUN
fumecheng-7188	5	34	requirements	requirement	NOUN
fumecheng-7188	5	35	.	.	PUNCT
fumecheng-7188	6	1	the	the	DET
fumecheng-7188	6	2	test	test	NOUN
fumecheng-7188	6	3	campaign	campaign	NOUN
fumecheng-7188	6	4	consisted	consist	VERB
fumecheng-7188	6	5	of	of	ADP
fumecheng-7188	6	6	three	three	NUM
fumecheng-7188	6	7	experiments	experiment	NOUN
fumecheng-7188	6	8	aimed	aim	VERB
fumecheng-7188	6	9	at	at	ADP
fumecheng-7188	6	10	determining	determine	VERB
fumecheng-7188	6	11	the	the	DET
fumecheng-7188	6	12	effect	effect	NOUN
fumecheng-7188	6	13	of	of	ADP
fumecheng-7188	6	14	scanning	scan	VERB
fumecheng-7188	6	15	velocity	velocity	NOUN
fumecheng-7188	6	16	on	on	ADP
fumecheng-7188	6	17	the	the	DET
fumecheng-7188	6	18	results	result	NOUN
fumecheng-7188	6	19	of	of	ADP
fumecheng-7188	6	20	form	form	NOUN
fumecheng-7188	6	21	deviation	deviation	NOUN
fumecheng-7188	6	22	δ	δ	PROPN
fumecheng-7188	6	23	measurement	measurement	NOUN
fumecheng-7188	6	24	,	,	PUNCT
fumecheng-7188	6	25	evaluation	evaluation	NOUN
fumecheng-7188	6	26	of	of	ADP
fumecheng-7188	6	27	deviation	deviation	NOUN
fumecheng-7188	6	28	δ	δ	PROPN
fumecheng-7188	6	29	measurement	measurement	NOUN
fumecheng-7188	6	30	uncertainty	uncertainty	NOUN
fumecheng-7188	6	31	and	and	CCONJ
fumecheng-7188	6	32	the	the	DET
fumecheng-7188	6	33	measurement	measurement	NOUN
fumecheng-7188	6	34	repeatability	repeatability	NOUN
fumecheng-7188	6	35	.	.	PUNCT
fumecheng-7188	7	1	the	the	DET
fumecheng-7188	7	2	scanning	scanning	NOUN
fumecheng-7188	7	3	time	time	NOUN
fumecheng-7188	7	4	was	be	AUX
fumecheng-7188	7	5	checked	check	VERB
fumecheng-7188	7	6	,	,	PUNCT
fumecheng-7188	7	7	too	too	ADV
fumecheng-7188	7	8	.	.	PUNCT
fumecheng-7188	8	1	the	the	DET
fumecheng-7188	8	2	obtained	obtain	VERB
fumecheng-7188	8	3	results	result	NOUN
fumecheng-7188	8	4	demonstrated	demonstrate	VERB
fumecheng-7188	8	5	feasibility	feasibility	NOUN
fumecheng-7188	8	6	of	of	ADP
fumecheng-7188	8	7	the	the	DET
fumecheng-7188	8	8	chosen	choose	VERB
fumecheng-7188	8	9	cmm	cmm	PROPN
fumecheng-7188	8	10	and	and	CCONJ
fumecheng-7188	8	11	measurement	measurement	NOUN
fumecheng-7188	8	12	strategy	strategy	NOUN
fumecheng-7188	8	13	.	.	PUNCT
fumecheng-7188	9	1	it	it	PRON
fumecheng-7188	9	2	was	be	AUX
fumecheng-7188	9	3	found	find	VERB
fumecheng-7188	9	4	also	also	ADV
fumecheng-7188	9	5	that	that	SCONJ
fumecheng-7188	9	6	the	the	DET
fumecheng-7188	9	7	measurement	measurement	NOUN
fumecheng-7188	9	8	uncertainty	uncertainty	NOUN
fumecheng-7188	9	9	did	do	AUX
fumecheng-7188	9	10	not	not	PART
fumecheng-7188	9	11	depend	depend	VERB
fumecheng-7188	9	12	on	on	ADP
fumecheng-7188	9	13	the	the	DET
fumecheng-7188	9	14	scanning	scanning	NOUN
fumecheng-7188	9	15	sampling	sample	VERB
fumecheng-7188	9	16	step	step	NOUN
fumecheng-7188	9	17	from	from	ADP
fumecheng-7188	9	18	0.05	0.05	NUM
fumecheng-7188	9	19	to	to	PART
fumecheng-7188	9	20	0.2	0.2	NUM
fumecheng-7188	9	21	mm	mm	NUM
fumecheng-7188	9	22	,	,	PUNCT
fumecheng-7188	9	23	and	and	CCONJ
fumecheng-7188	9	24	the	the	DET
fumecheng-7188	9	25	true	true	ADJ
fumecheng-7188	9	26	measurement	measurement	NOUN
fumecheng-7188	9	27	time	time	NOUN
fumecheng-7188	9	28	was	be	AUX
fumecheng-7188	9	29	for	for	ADP
fumecheng-7188	9	30	30	30	NUM
fumecheng-7188	9	31	-	-	SYM
fumecheng-7188	9	32	40	40	NUM
fumecheng-7188	9	33	%	%	NOUN
fumecheng-7188	9	34	longer	long	ADV
fumecheng-7188	9	35	than	than	ADP
fumecheng-7188	9	36	that	that	PRON
fumecheng-7188	9	37	expected	expect	VERB
fumecheng-7188	9	38	from	from	ADP
fumecheng-7188	9	39	the	the	DET
fumecheng-7188	9	40	nominal	nominal	ADJ
fumecheng-7188	9	41	scanning	scanning	NOUN
fumecheng-7188	9	42	velocity	velocity	NOUN
fumecheng-7188	9	43	.	.	PUNCT
fumecheng-7188	10	1	key	key	ADJ
fumecheng-7188	10	2	words	word	NOUN
fumecheng-7188	10	3	:	:	PUNCT
fumecheng-7188	10	4	curved	curved	ADJ
fumecheng-7188	10	5	profile	profile	NOUN
fumecheng-7188	10	6	,	,	PUNCT
fumecheng-7188	10	7	tolerance	tolerance	NOUN
fumecheng-7188	10	8	,	,	PUNCT
fumecheng-7188	10	9	measurement	measurement	NOUN
fumecheng-7188	10	10	,	,	PUNCT
fumecheng-7188	10	11	cmm	cmm	NOUN
fumecheng-7188	10	12	,	,	PUNCT
fumecheng-7188	10	13	uncertainty	uncertainty	NOUN
fumecheng-7188	10	14	1	1	NUM
fumecheng-7188	10	15	.	.	PUNCT
fumecheng-7188	11	1	introduction	introduction	NOUN
fumecheng-7188	11	2	free	free	ADJ
fumecheng-7188	11	3	-	-	PUNCT
fumecheng-7188	11	4	form	form	NOUN
fumecheng-7188	11	5	surfaces	surface	NOUN
fumecheng-7188	11	6	and	and	CCONJ
fumecheng-7188	11	7	curved	curved	ADJ
fumecheng-7188	11	8	profiles	profile	NOUN
fumecheng-7188	11	9	are	be	AUX
fumecheng-7188	11	10	widely	widely	ADV
fumecheng-7188	11	11	used	use	VERB
fumecheng-7188	11	12	in	in	ADP
fumecheng-7188	11	13	the	the	DET
fumecheng-7188	11	14	design	design	NOUN
fumecheng-7188	11	15	and	and	CCONJ
fumecheng-7188	11	16	manufacturing	manufacturing	NOUN
fumecheng-7188	11	17	of	of	ADP
fumecheng-7188	11	18	details	detail	NOUN
fumecheng-7188	11	19	with	with	ADP
fumecheng-7188	11	20	high	high	ADJ
fumecheng-7188	11	21	and	and	CCONJ
fumecheng-7188	11	22	strict	strict	ADJ
fumecheng-7188	11	23	precision	precision	NOUN
fumecheng-7188	11	24	requirements	requirement	NOUN
fumecheng-7188	11	25	[	[	X
fumecheng-7188	11	26	1,2	1,2	NUM
fumecheng-7188	11	27	]	]	PUNCT
fumecheng-7188	11	28	.	.	PUNCT
fumecheng-7188	12	1	during	during	ADP
fumecheng-7188	12	2	the	the	DET
fumecheng-7188	12	3	machining	machining	NOUN
fumecheng-7188	12	4	process	process	NOUN
fumecheng-7188	12	5	,	,	PUNCT
fumecheng-7188	12	6	vibrations	vibration	NOUN
fumecheng-7188	12	7	and	and	CCONJ
fumecheng-7188	12	8	other	other	ADJ
fumecheng-7188	12	9	inaccuracies	inaccuracy	NOUN
fumecheng-7188	12	10	may	may	AUX
fumecheng-7188	12	11	affect	affect	VERB
fumecheng-7188	12	12	the	the	DET
fumecheng-7188	12	13	final	final	ADJ
fumecheng-7188	12	14	state	state	NOUN
fumecheng-7188	12	15	of	of	ADP
fumecheng-7188	12	16	the	the	DET
fumecheng-7188	12	17	curved	curved	ADJ
fumecheng-7188	12	18	profile	profile	NOUN
fumecheng-7188	12	19	,	,	PUNCT
fumecheng-7188	12	20	which	which	PRON
fumecheng-7188	12	21	leads	lead	VERB
fumecheng-7188	12	22	to	to	ADP
fumecheng-7188	12	23	the	the	DET
fumecheng-7188	12	24	necessity	necessity	NOUN
fumecheng-7188	12	25	of	of	ADP
fumecheng-7188	12	26	thorough	thorough	ADJ
fumecheng-7188	12	27	dimensional	dimensional	ADJ
fumecheng-7188	12	28	and	and	CCONJ
fumecheng-7188	12	29	shape	shape	NOUN
fumecheng-7188	12	30	inspection	inspection	NOUN
fumecheng-7188	12	31	to	to	PART
fumecheng-7188	12	32	ensure	ensure	VERB
fumecheng-7188	12	33	its	its	PRON
fumecheng-7188	12	34	functionality	functionality	NOUN
fumecheng-7188	12	35	.	.	PUNCT
fumecheng-7188	13	1	thus	thus	ADV
fumecheng-7188	13	2	,	,	PUNCT
fumecheng-7188	13	3	the	the	DET
fumecheng-7188	13	4	characterization	characterization	NOUN
fumecheng-7188	13	5	of	of	ADP
fumecheng-7188	13	6	free	free	ADJ
fumecheng-7188	13	7	-	-	PUNCT
fumecheng-7188	13	8	form	form	NOUN
fumecheng-7188	13	9	surfaces	surface	NOUN
fumecheng-7188	13	10	is	be	AUX
fumecheng-7188	13	11	an	an	DET
fumecheng-7188	13	12	increasingly	increasingly	ADV
fumecheng-7188	13	13	important	important	ADJ
fumecheng-7188	13	14	area	area	NOUN
fumecheng-7188	13	15	of	of	ADP
fumecheng-7188	13	16	metrology	metrology	NOUN
fumecheng-7188	13	17	[	[	X
fumecheng-7188	13	18	3	3	NUM
fumecheng-7188	13	19	]	]	PUNCT
fumecheng-7188	13	20	.	.	PUNCT
fumecheng-7188	14	1	in	in	ADP
fumecheng-7188	14	2	particular	particular	ADJ
fumecheng-7188	14	3	,	,	PUNCT
fumecheng-7188	14	4	tolerance	tolerance	NOUN
fumecheng-7188	14	5	of	of	ADP
fumecheng-7188	14	6	the	the	DET
fumecheng-7188	14	7	profile	profile	NOUN
fumecheng-7188	14	8	along	along	ADP
fumecheng-7188	14	9	with	with	ADP
fumecheng-7188	14	10	the	the	DET
fumecheng-7188	14	11	position	position	NOUN
fumecheng-7188	14	12	tolerance	tolerance	NOUN
fumecheng-7188	14	13	is	be	AUX
fumecheng-7188	14	14	a	a	DET
fumecheng-7188	14	15	crucial	crucial	ADJ
fumecheng-7188	14	16	feature	feature	NOUN
fumecheng-7188	14	17	in	in	ADP
fumecheng-7188	14	18	the	the	DET
fumecheng-7188	14	19	design	design	NOUN
fumecheng-7188	14	20	and	and	CCONJ
fumecheng-7188	14	21	manufacture	manufacture	NOUN
fumecheng-7188	14	22	of	of	ADP
fumecheng-7188	14	23	products	product	NOUN
fumecheng-7188	14	24	with	with	ADP
fumecheng-7188	14	25	curved	curved	ADJ
fumecheng-7188	14	26	profiles	profile	NOUN
fumecheng-7188	14	27	.	.	PUNCT
fumecheng-7188	15	1	the	the	DET
fumecheng-7188	15	2	contour	contour	NOUN
fumecheng-7188	15	3	of	of	ADP
fumecheng-7188	15	4	curved	curved	ADJ
fumecheng-7188	15	5	profiles	profile	NOUN
fumecheng-7188	15	6	can	can	AUX
fumecheng-7188	15	7	be	be	AUX
fumecheng-7188	15	8	detected	detect	VERB
fumecheng-7188	15	9	either	either	CCONJ
fumecheng-7188	15	10	by	by	ADP
fumecheng-7188	15	11	sensing	sense	VERB
fumecheng-7188	15	12	or	or	CCONJ
fumecheng-7188	15	13	by	by	ADP
fumecheng-7188	15	14	measuring	measure	VERB
fumecheng-7188	15	15	,	,	PUNCT
fumecheng-7188	15	16	and	and	CCONJ
fumecheng-7188	15	17	measurement	measurement	NOUN
fumecheng-7188	15	18	systems	system	NOUN
fumecheng-7188	15	19	are	be	AUX
fumecheng-7188	15	20	generally	generally	ADV
fumecheng-7188	15	21	based	base	VERB
fumecheng-7188	15	22	on	on	ADP
fumecheng-7188	15	23	mobile	mobile	ADJ
fumecheng-7188	15	24	or	or	CCONJ
fumecheng-7188	15	25	stationary	stationary	ADJ
fumecheng-7188	15	26	coordinate	coordinate	NOUN
fumecheng-7188	15	27	measurement	measurement	NOUN
fumecheng-7188	15	28	systems	system	NOUN
fumecheng-7188	15	29	with	with	ADP
fumecheng-7188	15	30	specific	specific	ADJ
fumecheng-7188	15	31	software	software	NOUN
fumecheng-7188	15	32	and	and	CCONJ
fumecheng-7188	15	33	sensors	sensor	NOUN
fumecheng-7188	15	34	[	[	X
fumecheng-7188	15	35	4	4	NUM
fumecheng-7188	15	36	]	]	PUNCT
fumecheng-7188	15	37	.	.	PUNCT
fumecheng-7188	16	1	the	the	DET
fumecheng-7188	16	2	accuracy	accuracy	NOUN
fumecheng-7188	16	3	of	of	ADP
fumecheng-7188	16	4	the	the	DET
fumecheng-7188	16	5	results	result	NOUN
fumecheng-7188	16	6	from	from	ADP
fumecheng-7188	16	7	coordinate	coordinate	NOUN
fumecheng-7188	16	8	received	receive	VERB
fumecheng-7188	16	9	may	may	PROPN
fumecheng-7188	16	10	07	07	NUM
fumecheng-7188	16	11	,	,	PUNCT
fumecheng-7188	16	12	2021	2021	NUM
fumecheng-7188	16	13	/	/	SYM
fumecheng-7188	16	14	accepted	accept	VERB
fumecheng-7188	16	15	october	october	PROPN
fumecheng-7188	16	16	20	20	NUM
fumecheng-7188	16	17	,	,	PUNCT
fumecheng-7188	16	18	2021	2021	NUM
fumecheng-7188	16	19	corresponding	correspond	VERB
fumecheng-7188	16	20	author	author	NOUN
fumecheng-7188	16	21	:	:	PUNCT
fumecheng-7188	16	22	miroslaw	miroslaw	PROPN
fumecheng-7188	16	23	rucki	rucki	PROPN
fumecheng-7188	16	24	kazimierz	kazimierz	PROPN
fumecheng-7188	16	25	pulaski	pulaski	PROPN
fumecheng-7188	16	26	university	university	PROPN
fumecheng-7188	16	27	of	of	ADP
fumecheng-7188	16	28	technology	technology	NOUN
fumecheng-7188	16	29	and	and	CCONJ
fumecheng-7188	16	30	humanities	humanity	NOUN
fumecheng-7188	16	31	in	in	ADP
fumecheng-7188	16	32	radom	radom	NOUN
fumecheng-7188	16	33	,	,	PUNCT
fumecheng-7188	16	34	malczewskiego	malczewskiego	PROPN
fumecheng-7188	16	35	29	29	NUM
fumecheng-7188	16	36	,	,	PUNCT
fumecheng-7188	16	37	26	26	NUM
fumecheng-7188	16	38	-	-	SYM
fumecheng-7188	16	39	600	600	NUM
fumecheng-7188	16	40	radom	radom	NOUN
fumecheng-7188	16	41	,	,	PUNCT
fumecheng-7188	16	42	poland	poland	PROPN
fumecheng-7188	16	43	e	e	PROPN
fumecheng-7188	16	44	-	-	NOUN
fumecheng-7188	16	45	mail	mail	NOUN
fumecheng-7188	16	46	:	:	PUNCT
fumecheng-7188	16	47	m.rucki@uthrad.pl	m.rucki@uthrad.pl	PROPN
fumecheng-7188	16	48	122	122	NUM
fumecheng-7188	16	49	t.	t.	PROPN
fumecheng-7188	16	50	mazur	mazur	PROPN
fumecheng-7188	16	51	,	,	PUNCT
fumecheng-7188	16	52	m.	m.	PROPN
fumecheng-7188	16	53	rucki	rucki	PROPN
fumecheng-7188	16	54	,	,	PUNCT
fumecheng-7188	16	55	y.	y.	PROPN
fumecheng-7188	16	56	gutsalenko	gutsalenko	PROPN
fumecheng-7188	16	57	measurements	measurement	NOUN
fumecheng-7188	16	58	depends	depend	VERB
fumecheng-7188	16	59	on	on	ADP
fumecheng-7188	16	60	the	the	DET
fumecheng-7188	16	61	accuracy	accuracy	NOUN
fumecheng-7188	16	62	of	of	ADP
fumecheng-7188	16	63	the	the	DET
fumecheng-7188	16	64	measuring	measure	VERB
fumecheng-7188	16	65	device	device	NOUN
fumecheng-7188	16	66	,	,	PUNCT
fumecheng-7188	16	67	workpiece	workpiece	NOUN
fumecheng-7188	16	68	properties	property	NOUN
fumecheng-7188	16	69	,	,	PUNCT
fumecheng-7188	16	70	environmental	environmental	ADJ
fumecheng-7188	16	71	conditions	condition	NOUN
fumecheng-7188	16	72	,	,	PUNCT
fumecheng-7188	16	73	and	and	CCONJ
fumecheng-7188	16	74	especially	especially	ADV
fumecheng-7188	16	75	on	on	ADP
fumecheng-7188	16	76	the	the	DET
fumecheng-7188	16	77	operator	operator	NOUN
fumecheng-7188	16	78	and	and	CCONJ
fumecheng-7188	16	79	measurement	measurement	NOUN
fumecheng-7188	16	80	procedures	procedure	NOUN
fumecheng-7188	16	81	[	[	X
fumecheng-7188	16	82	5	5	NUM
fumecheng-7188	16	83	]	]	PUNCT
fumecheng-7188	16	84	.	.	PUNCT
fumecheng-7188	17	1	appropriate	appropriate	ADJ
fumecheng-7188	17	2	planning	planning	NOUN
fumecheng-7188	17	3	of	of	ADP
fumecheng-7188	17	4	a	a	DET
fumecheng-7188	17	5	measurement	measurement	NOUN
fumecheng-7188	17	6	strategy	strategy	NOUN
fumecheng-7188	17	7	for	for	ADP
fumecheng-7188	17	8	free	free	ADJ
fumecheng-7188	17	9	-	-	PUNCT
fumecheng-7188	17	10	form	form	NOUN
fumecheng-7188	17	11	surfaces	surface	NOUN
fumecheng-7188	17	12	is	be	AUX
fumecheng-7188	17	13	addressed	address	VERB
fumecheng-7188	17	14	in	in	ADP
fumecheng-7188	17	15	many	many	ADJ
fumecheng-7188	17	16	publications	publication	NOUN
fumecheng-7188	17	17	.	.	PUNCT
fumecheng-7188	18	1	for	for	ADP
fumecheng-7188	18	2	example	example	NOUN
fumecheng-7188	18	3	,	,	PUNCT
fumecheng-7188	18	4	it	it	PRON
fumecheng-7188	18	5	was	be	AUX
fumecheng-7188	18	6	proposed	propose	VERB
fumecheng-7188	18	7	to	to	PART
fumecheng-7188	18	8	establish	establish	VERB
fumecheng-7188	18	9	the	the	DET
fumecheng-7188	18	10	local	local	ADJ
fumecheng-7188	18	11	geometric	geometric	ADJ
fumecheng-7188	18	12	deviation	deviation	NOUN
fumecheng-7188	18	13	,	,	PUNCT
fumecheng-7188	18	14	namely	namely	ADV
fumecheng-7188	18	15	,	,	PUNCT
fumecheng-7188	18	16	the	the	DET
fumecheng-7188	18	17	difference	difference	NOUN
fumecheng-7188	18	18	between	between	ADP
fumecheng-7188	18	19	each	each	DET
fumecheng-7188	18	20	measurement	measurement	NOUN
fumecheng-7188	18	21	point	point	NOUN
fumecheng-7188	18	22	and	and	CCONJ
fumecheng-7188	18	23	the	the	DET
fumecheng-7188	18	24	cad	cad	PROPN
fumecheng-7188	18	25	model	model	NOUN
fumecheng-7188	18	26	of	of	ADP
fumecheng-7188	18	27	the	the	DET
fumecheng-7188	18	28	measured	measured	ADJ
fumecheng-7188	18	29	surface	surface	NOUN
fumecheng-7188	19	1	[	[	X
fumecheng-7188	19	2	6	6	NUM
fumecheng-7188	19	3	]	]	PUNCT
fumecheng-7188	19	4	.	.	PUNCT
fumecheng-7188	20	1	other	other	ADJ
fumecheng-7188	20	2	papers	paper	NOUN
fumecheng-7188	20	3	dealt	deal	VERB
fumecheng-7188	20	4	with	with	ADP
fumecheng-7188	20	5	two	two	NUM
fumecheng-7188	20	6	key	key	ADJ
fumecheng-7188	20	7	problems	problem	NOUN
fumecheng-7188	20	8	of	of	ADP
fumecheng-7188	20	9	surfaces	surface	NOUN
fumecheng-7188	20	10	and	and	CCONJ
fumecheng-7188	20	11	curves	curve	NOUN
fumecheng-7188	20	12	profile	profile	NOUN
fumecheng-7188	20	13	error	error	NOUN
fumecheng-7188	20	14	measurement	measurement	NOUN
fumecheng-7188	20	15	:	:	PUNCT
fumecheng-7188	20	16	(	(	PUNCT
fumecheng-7188	20	17	1	1	X
fumecheng-7188	20	18	)	)	PUNCT
fumecheng-7188	20	19	evaluation	evaluation	NOUN
fumecheng-7188	20	20	algorithm	algorithm	NOUN
fumecheng-7188	20	21	of	of	ADP
fumecheng-7188	20	22	profile	profile	NOUN
fumecheng-7188	20	23	error	error	NOUN
fumecheng-7188	20	24	on	on	ADP
fumecheng-7188	20	25	the	the	DET
fumecheng-7188	20	26	basis	basis	NOUN
fumecheng-7188	20	27	of	of	ADP
fumecheng-7188	20	28	minimum	minimum	NOUN
fumecheng-7188	20	29	zone	zone	NOUN
fumecheng-7188	20	30	principle	principle	NOUN
fumecheng-7188	20	31	or	or	CCONJ
fumecheng-7188	20	32	maximum	maximum	ADJ
fumecheng-7188	20	33	material	material	NOUN
fumecheng-7188	20	34	condition	condition	NOUN
fumecheng-7188	20	35	;	;	PUNCT
fumecheng-7188	20	36	(	(	PUNCT
fumecheng-7188	20	37	2	2	X
fumecheng-7188	20	38	)	)	PUNCT
fumecheng-7188	20	39	computer	computer	NOUN
fumecheng-7188	20	40	aided	aid	VERB
fumecheng-7188	20	41	arbitrament	arbitrament	NOUN
fumecheng-7188	20	42	for	for	ADP
fumecheng-7188	20	43	minimum	minimum	NOUN
fumecheng-7188	20	44	zone	zone	NOUN
fumecheng-7188	20	45	principle	principle	NOUN
fumecheng-7188	20	46	and	and	CCONJ
fumecheng-7188	20	47	maximum	maximum	ADJ
fumecheng-7188	20	48	material	material	NOUN
fumecheng-7188	20	49	condition	condition	NOUN
fumecheng-7188	20	50	[	[	X
fumecheng-7188	20	51	7	7	NUM
fumecheng-7188	20	52	]	]	PUNCT
fumecheng-7188	20	53	.	.	PUNCT
fumecheng-7188	21	1	for	for	ADP
fumecheng-7188	21	2	the	the	DET
fumecheng-7188	21	3	measurement	measurement	NOUN
fumecheng-7188	21	4	of	of	ADP
fumecheng-7188	21	5	freeform	freeform	ADJ
fumecheng-7188	21	6	shaped	shape	VERB
fumecheng-7188	21	7	workpieces	workpiece	NOUN
fumecheng-7188	21	8	,	,	PUNCT
fumecheng-7188	21	9	the	the	DET
fumecheng-7188	21	10	distortions	distortion	NOUN
fumecheng-7188	21	11	caused	cause	VERB
fumecheng-7188	21	12	by	by	ADP
fumecheng-7188	21	13	the	the	DET
fumecheng-7188	21	14	tip	tip	NOUN
fumecheng-7188	21	15	mechanical	mechanical	ADJ
fumecheng-7188	21	16	filtration	filtration	NOUN
fumecheng-7188	21	17	have	have	VERB
fumecheng-7188	21	18	impact	impact	NOUN
fumecheng-7188	21	19	on	on	ADP
fumecheng-7188	21	20	measurement	measurement	NOUN
fumecheng-7188	21	21	accuracy	accuracy	NOUN
fumecheng-7188	21	22	,	,	PUNCT
fumecheng-7188	21	23	so	so	SCONJ
fumecheng-7188	21	24	that	that	DET
fumecheng-7188	21	25	correction	correction	NOUN
fumecheng-7188	21	26	is	be	AUX
fumecheng-7188	21	27	desired	desire	VERB
fumecheng-7188	21	28	in	in	ADP
fumecheng-7188	21	29	order	order	NOUN
fumecheng-7188	21	30	to	to	PART
fumecheng-7188	21	31	restore	restore	VERB
fumecheng-7188	21	32	to	to	ADP
fumecheng-7188	21	33	the	the	DET
fumecheng-7188	21	34	real	real	ADJ
fumecheng-7188	21	35	workpiece	workpiece	NOUN
fumecheng-7188	21	36	surface	surface	NOUN
fumecheng-7188	22	1	[	[	X
fumecheng-7188	22	2	8	8	NUM
fumecheng-7188	22	3	]	]	PUNCT
fumecheng-7188	22	4	.	.	PUNCT
fumecheng-7188	23	1	menq	menq	PROPN
fumecheng-7188	23	2	and	and	CCONJ
fumecheng-7188	23	3	chen	chen	PROPN
fumecheng-7188	23	4	noted	note	VERB
fumecheng-7188	23	5	that	that	SCONJ
fumecheng-7188	23	6	after	after	SCONJ
fumecheng-7188	23	7	measurement	measurement	NOUN
fumecheng-7188	23	8	with	with	ADP
fumecheng-7188	23	9	a	a	DET
fumecheng-7188	23	10	contact	contact	NOUN
fumecheng-7188	23	11	probe	probe	NOUN
fumecheng-7188	23	12	,	,	PUNCT
fumecheng-7188	23	13	the	the	DET
fumecheng-7188	23	14	generated	generate	VERB
fumecheng-7188	23	15	surface	surface	NOUN
fumecheng-7188	23	16	differed	differ	VERB
fumecheng-7188	23	17	from	from	ADP
fumecheng-7188	23	18	the	the	DET
fumecheng-7188	23	19	real	real	ADJ
fumecheng-7188	23	20	one	one	NOUN
fumecheng-7188	23	21	because	because	SCONJ
fumecheng-7188	23	22	of	of	ADP
fumecheng-7188	23	23	the	the	DET
fumecheng-7188	23	24	radius	radius	NOUN
fumecheng-7188	23	25	compensation	compensation	NOUN
fumecheng-7188	23	26	errors	error	NOUN
fumecheng-7188	23	27	of	of	ADP
fumecheng-7188	23	28	the	the	DET
fumecheng-7188	23	29	probe	probe	NOUN
fumecheng-7188	23	30	.	.	PUNCT
fumecheng-7188	24	1	minimization	minimization	NOUN
fumecheng-7188	24	2	of	of	ADP
fumecheng-7188	24	3	the	the	DET
fumecheng-7188	24	4	compensation	compensation	NOUN
fumecheng-7188	24	5	errors	error	NOUN
fumecheng-7188	24	6	required	require	VERB
fumecheng-7188	24	7	that	that	SCONJ
fumecheng-7188	24	8	the	the	DET
fumecheng-7188	24	9	probing	probe	VERB
fumecheng-7188	24	10	directions	direction	NOUN
fumecheng-7188	24	11	of	of	ADP
fumecheng-7188	24	12	the	the	DET
fumecheng-7188	24	13	cmm	cmm	PROPN
fumecheng-7188	24	14	coincide	coincide	NOUN
fumecheng-7188	24	15	with	with	ADP
fumecheng-7188	24	16	the	the	DET
fumecheng-7188	24	17	normal	normal	ADJ
fumecheng-7188	24	18	vectors	vector	NOUN
fumecheng-7188	24	19	of	of	ADP
fumecheng-7188	24	20	the	the	DET
fumecheng-7188	24	21	probed	probe	VERB
fumecheng-7188	24	22	points	point	NOUN
fumecheng-7188	24	23	.	.	PUNCT
fumecheng-7188	25	1	they	they	PRON
fumecheng-7188	25	2	emphasized	emphasize	VERB
fumecheng-7188	25	3	unavailability	unavailability	NOUN
fumecheng-7188	25	4	of	of	ADP
fumecheng-7188	25	5	the	the	DET
fumecheng-7188	25	6	normal	normal	ADJ
fumecheng-7188	25	7	vectors	vector	NOUN
fumecheng-7188	25	8	of	of	ADP
fumecheng-7188	25	9	data	datum	NOUN
fumecheng-7188	25	10	points	point	NOUN
fumecheng-7188	25	11	when	when	SCONJ
fumecheng-7188	25	12	the	the	DET
fumecheng-7188	25	13	cad	cad	PROPN
fumecheng-7188	25	14	model	model	NOUN
fumecheng-7188	25	15	of	of	ADP
fumecheng-7188	25	16	a	a	DET
fumecheng-7188	25	17	new	new	ADJ
fumecheng-7188	25	18	design	design	NOUN
fumecheng-7188	25	19	did	do	AUX
fumecheng-7188	25	20	not	not	PART
fumecheng-7188	25	21	exist	exist	VERB
fumecheng-7188	25	22	[	[	PUNCT
fumecheng-7188	25	23	9	9	NUM
fumecheng-7188	25	24	]	]	PUNCT
fumecheng-7188	25	25	.	.	PUNCT
fumecheng-7188	26	1	similarly	similarly	ADV
fumecheng-7188	26	2	,	,	PUNCT
fumecheng-7188	26	3	in	in	ADP
fumecheng-7188	26	4	3d	3d	NUM
fumecheng-7188	26	5	gear	gear	NOUN
fumecheng-7188	26	6	measurements	measurement	NOUN
fumecheng-7188	26	7	,	,	PUNCT
fumecheng-7188	26	8	the	the	DET
fumecheng-7188	26	9	influence	influence	NOUN
fumecheng-7188	26	10	of	of	ADP
fumecheng-7188	26	11	cmm	cmm	PROPN
fumecheng-7188	26	12	geometric	geometric	ADJ
fumecheng-7188	26	13	errors	error	NOUN
fumecheng-7188	26	14	on	on	ADP
fumecheng-7188	26	15	the	the	DET
fumecheng-7188	26	16	results	result	NOUN
fumecheng-7188	26	17	is	be	AUX
fumecheng-7188	26	18	still	still	ADV
fumecheng-7188	26	19	unclear	unclear	ADJ
fumecheng-7188	26	20	because	because	SCONJ
fumecheng-7188	26	21	the	the	DET
fumecheng-7188	26	22	requirement	requirement	NOUN
fumecheng-7188	26	23	for	for	ADP
fumecheng-7188	26	24	a	a	DET
fumecheng-7188	26	25	gear	gear	NOUN
fumecheng-7188	26	26	measurement	measurement	NOUN
fumecheng-7188	26	27	standard	standard	NOUN
fumecheng-7188	26	28	with	with	ADP
fumecheng-7188	26	29	ideal	ideal	ADJ
fumecheng-7188	26	30	geometry	geometry	NOUN
fumecheng-7188	26	31	can	can	AUX
fumecheng-7188	26	32	not	not	PART
fumecheng-7188	26	33	be	be	AUX
fumecheng-7188	26	34	fulfilled	fulfil	VERB
fumecheng-7188	26	35	[	[	PUNCT
fumecheng-7188	26	36	10	10	NUM
fumecheng-7188	26	37	]	]	PUNCT
fumecheng-7188	26	38	.	.	PUNCT
fumecheng-7188	27	1	it	it	PRON
fumecheng-7188	27	2	should	should	AUX
fumecheng-7188	27	3	be	be	AUX
fumecheng-7188	27	4	noted	note	VERB
fumecheng-7188	27	5	that	that	SCONJ
fumecheng-7188	27	6	the	the	DET
fumecheng-7188	27	7	laser	laser	NOUN
fumecheng-7188	27	8	-	-	PUNCT
fumecheng-7188	27	9	based	base	VERB
fumecheng-7188	27	10	measurement	measurement	NOUN
fumecheng-7188	27	11	methods	method	NOUN
fumecheng-7188	27	12	of	of	ADP
fumecheng-7188	27	13	curved	curved	ADJ
fumecheng-7188	27	14	profiles	profile	NOUN
fumecheng-7188	27	15	need	need	VERB
fumecheng-7188	27	16	compensation	compensation	NOUN
fumecheng-7188	27	17	,	,	PUNCT
fumecheng-7188	27	18	too	too	ADV
fumecheng-7188	28	1	[	[	X
fumecheng-7188	28	2	11	11	NUM
fumecheng-7188	28	3	]	]	PUNCT
fumecheng-7188	28	4	.	.	PUNCT
fumecheng-7188	29	1	a	a	DET
fumecheng-7188	29	2	significant	significant	ADJ
fumecheng-7188	29	3	share	share	NOUN
fumecheng-7188	29	4	in	in	ADP
fumecheng-7188	29	5	the	the	DET
fumecheng-7188	29	6	overall	overall	ADJ
fumecheng-7188	29	7	calculus	calculus	NOUN
fumecheng-7188	29	8	of	of	ADP
fumecheng-7188	29	9	errors	error	NOUN
fumecheng-7188	29	10	in	in	ADP
fumecheng-7188	29	11	scanning	scan	VERB
fumecheng-7188	29	12	measurements	measurement	NOUN
fumecheng-7188	29	13	performed	perform	VERB
fumecheng-7188	29	14	on	on	ADP
fumecheng-7188	29	15	coordinate	coordinate	NOUN
fumecheng-7188	29	16	measuring	measure	VERB
fumecheng-7188	29	17	machines	machine	NOUN
fumecheng-7188	29	18	(	(	PUNCT
fumecheng-7188	29	19	cmm	cmm	NOUN
fumecheng-7188	29	20	)	)	PUNCT
fumecheng-7188	29	21	refers	refer	VERB
fumecheng-7188	29	22	to	to	ADP
fumecheng-7188	29	23	dynamic	dynamic	ADJ
fumecheng-7188	29	24	errors	error	NOUN
fumecheng-7188	29	25	[	[	X
fumecheng-7188	29	26	12	12	NUM
fumecheng-7188	29	27	]	]	PUNCT
fumecheng-7188	29	28	.	.	PUNCT
fumecheng-7188	30	1	since	since	SCONJ
fumecheng-7188	30	2	the	the	DET
fumecheng-7188	30	3	measurement	measurement	NOUN
fumecheng-7188	30	4	time	time	NOUN
fumecheng-7188	30	5	and	and	CCONJ
fumecheng-7188	30	6	cost	cost	NOUN
fumecheng-7188	30	7	increase	increase	NOUN
fumecheng-7188	30	8	proportionally	proportionally	ADV
fumecheng-7188	30	9	as	as	ADP
fumecheng-7188	30	10	the	the	DET
fumecheng-7188	30	11	increase	increase	NOUN
fumecheng-7188	30	12	of	of	ADP
fumecheng-7188	30	13	sampling	sample	VERB
fumecheng-7188	30	14	points	point	NOUN
fumecheng-7188	30	15	,	,	PUNCT
fumecheng-7188	30	16	it	it	PRON
fumecheng-7188	30	17	is	be	AUX
fumecheng-7188	30	18	essential	essential	ADJ
fumecheng-7188	30	19	to	to	PART
fumecheng-7188	30	20	study	study	VERB
fumecheng-7188	30	21	a	a	DET
fumecheng-7188	30	22	sampling	sampling	NOUN
fumecheng-7188	30	23	method	method	NOUN
fumecheng-7188	30	24	[	[	X
fumecheng-7188	30	25	13	13	NUM
fumecheng-7188	30	26	]	]	PUNCT
fumecheng-7188	30	27	.	.	PUNCT
fumecheng-7188	31	1	the	the	DET
fumecheng-7188	31	2	volumetric	volumetric	NOUN
fumecheng-7188	31	3	probing	probe	VERB
fumecheng-7188	31	4	uncertainty	uncertainty	NOUN
fumecheng-7188	31	5	of	of	ADP
fumecheng-7188	31	6	a	a	DET
fumecheng-7188	31	7	cmm	cmm	NOUN
fumecheng-7188	31	8	is	be	AUX
fumecheng-7188	31	9	usually	usually	ADV
fumecheng-7188	31	10	determined	determine	VERB
fumecheng-7188	31	11	adding	add	VERB
fumecheng-7188	31	12	a	a	DET
fumecheng-7188	31	13	component	component	NOUN
fumecheng-7188	31	14	of	of	ADP
fumecheng-7188	31	15	the	the	DET
fumecheng-7188	31	16	length	length	NOUN
fumecheng-7188	31	17	measuring	measure	VERB
fumecheng-7188	31	18	uncertainty	uncertainty	NOUN
fumecheng-7188	31	19	,	,	PUNCT
fumecheng-7188	31	20	considering	consider	VERB
fumecheng-7188	31	21	the	the	DET
fumecheng-7188	31	22	distance	distance	NOUN
fumecheng-7188	31	23	between	between	ADP
fumecheng-7188	31	24	25	25	NUM
fumecheng-7188	31	25	points	point	NOUN
fumecheng-7188	31	26	on	on	ADP
fumecheng-7188	31	27	the	the	DET
fumecheng-7188	31	28	calibrating	calibrate	VERB
fumecheng-7188	31	29	sphere	sphere	ADV
fumecheng-7188	31	30	,	,	PUNCT
fumecheng-7188	31	31	to	to	PART
fumecheng-7188	31	32	get	get	VERB
fumecheng-7188	31	33	the	the	DET
fumecheng-7188	31	34	overall	overall	ADJ
fumecheng-7188	31	35	point	point	NOUN
fumecheng-7188	31	36	coordinate	coordinate	NOUN
fumecheng-7188	31	37	uncertainty	uncertainty	NOUN
fumecheng-7188	31	38	of	of	ADP
fumecheng-7188	31	39	the	the	DET
fumecheng-7188	31	40	cmm	cmm	NOUN
fumecheng-7188	32	1	[	[	X
fumecheng-7188	32	2	14	14	NUM
fumecheng-7188	32	3	]	]	PUNCT
fumecheng-7188	32	4	.	.	PUNCT
fumecheng-7188	33	1	evaluation	evaluation	NOUN
fumecheng-7188	33	2	of	of	ADP
fumecheng-7188	33	3	repeatability	repeatability	NOUN
fumecheng-7188	33	4	and	and	CCONJ
fumecheng-7188	33	5	reproducibility	reproducibility	NOUN
fumecheng-7188	33	6	of	of	ADP
fumecheng-7188	33	7	the	the	DET
fumecheng-7188	33	8	cmm	cmm	PROPN
fumecheng-7188	33	9	equipment	equipment	NOUN
fumecheng-7188	33	10	is	be	AUX
fumecheng-7188	33	11	necessary	necessary	ADJ
fumecheng-7188	33	12	,	,	PUNCT
fumecheng-7188	33	13	too	too	ADV
fumecheng-7188	33	14	[	[	X
fumecheng-7188	33	15	15	15	NUM
fumecheng-7188	33	16	]	]	PUNCT
fumecheng-7188	33	17	.	.	PUNCT
fumecheng-7188	34	1	prior	prior	ADV
fumecheng-7188	34	2	to	to	ADP
fumecheng-7188	34	3	numerical	numerical	ADJ
fumecheng-7188	34	4	characterization	characterization	NOUN
fumecheng-7188	34	5	,	,	PUNCT
fumecheng-7188	34	6	filtering	filtering	NOUN
fumecheng-7188	34	7	is	be	AUX
fumecheng-7188	34	8	done	do	VERB
fumecheng-7188	34	9	and	and	CCONJ
fumecheng-7188	34	10	it	it	PRON
fumecheng-7188	34	11	is	be	AUX
fumecheng-7188	34	12	also	also	ADV
fumecheng-7188	34	13	essential	essential	ADJ
fumecheng-7188	34	14	for	for	ADP
fumecheng-7188	34	15	extracting	extract	VERB
fumecheng-7188	34	16	information	information	NOUN
fumecheng-7188	34	17	needed	need	VERB
fumecheng-7188	34	18	to	to	PART
fumecheng-7188	34	19	provide	provide	VERB
fumecheng-7188	34	20	process	process	NOUN
fumecheng-7188	34	21	feedback	feedback	NOUN
fumecheng-7188	34	22	and	and	CCONJ
fumecheng-7188	34	23	establish	establish	VERB
fumecheng-7188	34	24	functional	functional	ADJ
fumecheng-7188	34	25	correlation	correlation	NOUN
fumecheng-7188	34	26	[	[	X
fumecheng-7188	34	27	16	16	NUM
fumecheng-7188	34	28	]	]	PUNCT
fumecheng-7188	34	29	.	.	PUNCT
fumecheng-7188	35	1	a	a	DET
fumecheng-7188	35	2	study	study	NOUN
fumecheng-7188	35	3	of	of	ADP
fumecheng-7188	35	4	roundness	roundness	NOUN
fumecheng-7188	35	5	of	of	ADP
fumecheng-7188	35	6	different	different	ADJ
fumecheng-7188	35	7	artifacts	artifact	NOUN
fumecheng-7188	35	8	using	use	VERB
fumecheng-7188	35	9	different	different	ADJ
fumecheng-7188	35	10	algorithm	algorithm	NOUN
fumecheng-7188	35	11	and	and	CCONJ
fumecheng-7188	35	12	filters	filter	NOUN
fumecheng-7188	35	13	demonstrated	demonstrate	VERB
fumecheng-7188	35	14	impact	impact	NOUN
fumecheng-7188	35	15	of	of	ADP
fumecheng-7188	35	16	filtering	filter	VERB
fumecheng-7188	35	17	on	on	ADP
fumecheng-7188	35	18	the	the	DET
fumecheng-7188	35	19	measurement	measurement	NOUN
fumecheng-7188	35	20	results	result	VERB
fumecheng-7188	35	21	[	[	X
fumecheng-7188	35	22	17	17	NUM
fumecheng-7188	35	23	]	]	PUNCT
fumecheng-7188	35	24	.	.	PUNCT
fumecheng-7188	36	1	the	the	DET
fumecheng-7188	36	2	number	number	NOUN
fumecheng-7188	36	3	of	of	ADP
fumecheng-7188	36	4	cmm	cmm	PROPN
fumecheng-7188	36	5	points	point	NOUN
fumecheng-7188	36	6	in	in	ADP
fumecheng-7188	36	7	the	the	DET
fumecheng-7188	36	8	measurement	measurement	NOUN
fumecheng-7188	36	9	of	of	ADP
fumecheng-7188	36	10	each	each	DET
fumecheng-7188	36	11	feature	feature	NOUN
fumecheng-7188	36	12	of	of	ADP
fumecheng-7188	36	13	a	a	DET
fumecheng-7188	36	14	part	part	NOUN
fumecheng-7188	36	15	has	have	VERB
fumecheng-7188	36	16	to	to	PART
fumecheng-7188	36	17	enable	enable	VERB
fumecheng-7188	36	18	achievement	achievement	NOUN
fumecheng-7188	36	19	of	of	ADP
fumecheng-7188	36	20	a	a	DET
fumecheng-7188	36	21	simulated	simulate	VERB
fumecheng-7188	36	22	feature	feature	NOUN
fumecheng-7188	36	23	-	-	PUNCT
fumecheng-7188	36	24	fit	fit	NOUN
fumecheng-7188	36	25	that	that	PRON
fumecheng-7188	36	26	results	result	VERB
fumecheng-7188	36	27	in	in	ADP
fumecheng-7188	36	28	a	a	DET
fumecheng-7188	36	29	high	high	ADJ
fumecheng-7188	36	30	-	-	PUNCT
fumecheng-7188	36	31	quality	quality	NOUN
fumecheng-7188	36	32	representation	representation	NOUN
fumecheng-7188	36	33	of	of	ADP
fumecheng-7188	36	34	the	the	DET
fumecheng-7188	36	35	manufactured	manufacture	VERB
fumecheng-7188	36	36	feature	feature	NOUN
fumecheng-7188	36	37	[	[	X
fumecheng-7188	36	38	18	18	NUM
fumecheng-7188	36	39	]	]	PUNCT
fumecheng-7188	36	40	.	.	PUNCT
fumecheng-7188	37	1	in	in	ADP
fumecheng-7188	37	2	order	order	NOUN
fumecheng-7188	37	3	to	to	PART
fumecheng-7188	37	4	simplify	simplify	VERB
fumecheng-7188	37	5	the	the	DET
fumecheng-7188	37	6	calculation	calculation	NOUN
fumecheng-7188	37	7	and	and	CCONJ
fumecheng-7188	37	8	simultaneously	simultaneously	ADV
fumecheng-7188	37	9	retain	retain	VERB
fumecheng-7188	37	10	the	the	DET
fumecheng-7188	37	11	accuracy	accuracy	NOUN
fumecheng-7188	37	12	of	of	ADP
fumecheng-7188	37	13	evaluation	evaluation	NOUN
fumecheng-7188	37	14	,	,	PUNCT
fumecheng-7188	37	15	the	the	DET
fumecheng-7188	37	16	method	method	NOUN
fumecheng-7188	37	17	was	be	AUX
fumecheng-7188	37	18	proposed	propose	VERB
fumecheng-7188	37	19	,	,	PUNCT
fumecheng-7188	37	20	based	base	VERB
fumecheng-7188	37	21	on	on	ADP
fumecheng-7188	37	22	the	the	DET
fumecheng-7188	37	23	extraction	extraction	NOUN
fumecheng-7188	37	24	of	of	ADP
fumecheng-7188	37	25	key	key	ADJ
fumecheng-7188	37	26	points	point	NOUN
fumecheng-7188	37	27	from	from	ADP
fumecheng-7188	37	28	scanning	scan	VERB
fumecheng-7188	37	29	data	datum	NOUN
fumecheng-7188	37	30	set	set	VERB
fumecheng-7188	37	31	[	[	X
fumecheng-7188	37	32	19	19	NUM
fumecheng-7188	37	33	]	]	PUNCT
fumecheng-7188	37	34	.	.	PUNCT
fumecheng-7188	38	1	other	other	ADJ
fumecheng-7188	38	2	authors	author	NOUN
fumecheng-7188	38	3	emphasized	emphasize	VERB
fumecheng-7188	38	4	,	,	PUNCT
fumecheng-7188	38	5	however	however	ADV
fumecheng-7188	38	6	,	,	PUNCT
fumecheng-7188	38	7	that	that	SCONJ
fumecheng-7188	38	8	the	the	DET
fumecheng-7188	38	9	simulation	simulation	NOUN
fumecheng-7188	38	10	of	of	ADP
fumecheng-7188	38	11	measurement	measurement	NOUN
fumecheng-7188	38	12	became	become	VERB
fumecheng-7188	38	13	very	very	ADV
fumecheng-7188	38	14	complicated	complicated	ADJ
fumecheng-7188	38	15	when	when	SCONJ
fumecheng-7188	38	16	the	the	DET
fumecheng-7188	38	17	solution	solution	NOUN
fumecheng-7188	38	18	of	of	ADP
fumecheng-7188	38	19	the	the	DET
fumecheng-7188	38	20	measuring	measure	VERB
fumecheng-7188	38	21	task	task	NOUN
fumecheng-7188	38	22	needed	need	VERB
fumecheng-7188	38	23	construction	construction	NOUN
fumecheng-7188	38	24	of	of	ADP
fumecheng-7188	38	25	elements	element	NOUN
fumecheng-7188	38	26	using	use	VERB
fumecheng-7188	38	27	measured	measured	ADJ
fumecheng-7188	38	28	features	feature	NOUN
fumecheng-7188	38	29	[	[	X
fumecheng-7188	38	30	20	20	NUM
fumecheng-7188	38	31	]	]	PUNCT
fumecheng-7188	38	32	.	.	PUNCT
fumecheng-7188	39	1	some	some	DET
fumecheng-7188	39	2	authors	author	NOUN
fumecheng-7188	39	3	emphasized	emphasize	VERB
fumecheng-7188	39	4	that	that	SCONJ
fumecheng-7188	39	5	there	there	PRON
fumecheng-7188	39	6	are	be	VERB
fumecheng-7188	39	7	very	very	ADV
fumecheng-7188	39	8	few	few	ADJ
fumecheng-7188	39	9	commercially	commercially	ADV
fumecheng-7188	39	10	available	available	ADJ
fumecheng-7188	39	11	software	software	NOUN
fumecheng-7188	39	12	systems	system	NOUN
fumecheng-7188	39	13	that	that	PRON
fumecheng-7188	39	14	offer	offer	VERB
fumecheng-7188	39	15	sweep	sweep	NOUN
fumecheng-7188	39	16	scan	scan	PROPN
fumecheng-7188	39	17	path	path	PROPN
fumecheng-7188	39	18	planning	planning	NOUN
fumecheng-7188	39	19	function	function	NOUN
fumecheng-7188	39	20	.	.	PUNCT
fumecheng-7188	40	1	moreover	moreover	ADV
fumecheng-7188	40	2	,	,	PUNCT
fumecheng-7188	40	3	newly	newly	ADV
fumecheng-7188	40	4	proposed	propose	VERB
fumecheng-7188	40	5	methods	method	NOUN
fumecheng-7188	40	6	able	able	ADJ
fumecheng-7188	40	7	to	to	PART
fumecheng-7188	40	8	generate	generate	VERB
fumecheng-7188	40	9	a	a	DET
fumecheng-7188	40	10	viable	viable	ADJ
fumecheng-7188	40	11	sweep	sweep	NOUN
fumecheng-7188	40	12	scan	scan	PROPN
fumecheng-7188	40	13	path	path	NOUN
fumecheng-7188	40	14	automatically	automatically	ADV
fumecheng-7188	40	15	require	require	VERB
fumecheng-7188	40	16	significant	significant	ADJ
fumecheng-7188	40	17	user	user	NOUN
fumecheng-7188	40	18	’s	’s	PART
fumecheng-7188	40	19	knowledge	knowledge	NOUN
fumecheng-7188	40	20	and	and	CCONJ
fumecheng-7188	40	21	involvement	involvement	NOUN
fumecheng-7188	41	1	[	[	X
fumecheng-7188	41	2	21	21	NUM
fumecheng-7188	41	3	]	]	PUNCT
fumecheng-7188	41	4	.	.	PUNCT
fumecheng-7188	42	1	from	from	ADP
fumecheng-7188	42	2	that	that	DET
fumecheng-7188	42	3	perspective	perspective	NOUN
fumecheng-7188	42	4	,	,	PUNCT
fumecheng-7188	42	5	it	it	PRON
fumecheng-7188	42	6	is	be	AUX
fumecheng-7188	42	7	crucial	crucial	ADJ
fumecheng-7188	42	8	to	to	PART
fumecheng-7188	42	9	keep	keep	VERB
fumecheng-7188	42	10	consistency	consistency	NOUN
fumecheng-7188	42	11	in	in	ADP
fumecheng-7188	42	12	the	the	DET
fumecheng-7188	42	13	measurement	measurement	NOUN
fumecheng-7188	42	14	procedure	procedure	NOUN
fumecheng-7188	42	15	.	.	PUNCT
fumecheng-7188	43	1	a	a	DET
fumecheng-7188	43	2	dictionary	dictionary	ADJ
fumecheng-7188	43	3	definition	definition	NOUN
fumecheng-7188	43	4	of	of	ADP
fumecheng-7188	43	5	‘	'	PUNCT
fumecheng-7188	43	6	consistency	consistency	NOUN
fumecheng-7188	43	7	’	'	PUNCT
fumecheng-7188	43	8	is	be	AUX
fumecheng-7188	43	9	‘	'	PUNCT
fumecheng-7188	43	10	constant	constant	ADJ
fumecheng-7188	43	11	adherence	adherence	NOUN
fumecheng-7188	43	12	to	to	ADP
fumecheng-7188	43	13	the	the	DET
fumecheng-7188	43	14	same	same	ADJ
fumecheng-7188	43	15	principles	principle	NOUN
fumecheng-7188	43	16	of	of	ADP
fumecheng-7188	43	17	thought	thought	NOUN
fumecheng-7188	43	18	or	or	CCONJ
fumecheng-7188	43	19	action	action	NOUN
fumecheng-7188	43	20	’	'	PUNCT
fumecheng-7188	44	1	[	[	X
fumecheng-7188	44	2	22	22	NUM
fumecheng-7188	44	3	]	]	PUNCT
fumecheng-7188	44	4	.	.	PUNCT
fumecheng-7188	45	1	saunders	saunder	NOUN
fumecheng-7188	45	2	and	and	CCONJ
fumecheng-7188	45	3	co	co	NOUN
fumecheng-7188	45	4	-	-	NOUN
fumecheng-7188	45	5	authors	author	NOUN
fumecheng-7188	45	6	noted	note	VERB
fumecheng-7188	45	7	that	that	SCONJ
fumecheng-7188	45	8	this	this	DET
fumecheng-7188	45	9	definition	definition	NOUN
fumecheng-7188	45	10	is	be	AUX
fumecheng-7188	45	11	intended	intend	VERB
fumecheng-7188	45	12	to	to	PART
fumecheng-7188	45	13	refer	refer	VERB
fumecheng-7188	45	14	to	to	ADP
fumecheng-7188	45	15	a	a	DET
fumecheng-7188	45	16	personal	personal	ADJ
fumecheng-7188	45	17	characteristic	characteristic	NOUN
fumecheng-7188	45	18	,	,	PUNCT
fumecheng-7188	45	19	but	but	CCONJ
fumecheng-7188	45	20	since	since	SCONJ
fumecheng-7188	45	21	many	many	ADJ
fumecheng-7188	45	22	personal	personal	ADJ
fumecheng-7188	45	23	choices	choice	NOUN
fumecheng-7188	45	24	are	be	AUX
fumecheng-7188	45	25	made	make	VERB
fumecheng-7188	45	26	during	during	ADP
fumecheng-7188	45	27	programming	programming	NOUN
fumecheng-7188	45	28	,	,	PUNCT
fumecheng-7188	45	29	accuracy	accuracy	NOUN
fumecheng-7188	45	30	analysis	analysis	NOUN
fumecheng-7188	45	31	of	of	ADP
fumecheng-7188	45	32	the	the	DET
fumecheng-7188	45	33	curved	curved	ADJ
fumecheng-7188	45	34	profile	profile	PROPN
fumecheng-7188	45	35	measurement	measurement	NOUN
fumecheng-7188	45	36	with	with	ADP
fumecheng-7188	45	37	cmm	cmm	NOUN
fumecheng-7188	45	38	:	:	PUNCT
fumecheng-7188	45	39	a	a	DET
fumecheng-7188	45	40	case	case	NOUN
fumecheng-7188	45	41	study	study	NOUN
fumecheng-7188	45	42	123	123	NUM
fumecheng-7188	45	43	operating	operating	NOUN
fumecheng-7188	45	44	,	,	PUNCT
fumecheng-7188	45	45	and	and	CCONJ
fumecheng-7188	45	46	evaluating	evaluating	NOUN
fumecheng-7188	45	47	of	of	ADP
fumecheng-7188	45	48	the	the	DET
fumecheng-7188	45	49	cmm	cmm	NOUN
fumecheng-7188	45	50	measured	measure	VERB
fumecheng-7188	45	51	points	point	NOUN
fumecheng-7188	45	52	,	,	PUNCT
fumecheng-7188	45	53	the	the	DET
fumecheng-7188	45	54	term	term	NOUN
fumecheng-7188	45	55	also	also	ADV
fumecheng-7188	45	56	works	work	VERB
fumecheng-7188	45	57	well	well	ADV
fumecheng-7188	45	58	within	within	ADP
fumecheng-7188	45	59	the	the	DET
fumecheng-7188	45	60	context	context	NOUN
fumecheng-7188	45	61	of	of	ADP
fumecheng-7188	45	62	measurement	measurement	NOUN
fumecheng-7188	46	1	[	[	X
fumecheng-7188	46	2	23	23	NUM
fumecheng-7188	46	3	]	]	PUNCT
fumecheng-7188	46	4	.	.	PUNCT
fumecheng-7188	47	1	according	accord	VERB
fumecheng-7188	47	2	to	to	ADP
fumecheng-7188	47	3	the	the	DET
fumecheng-7188	47	4	definition	definition	NOUN
fumecheng-7188	47	5	of	of	ADP
fumecheng-7188	47	6	the	the	DET
fumecheng-7188	47	7	profile	profile	NOUN
fumecheng-7188	47	8	tolerance	tolerance	NOUN
fumecheng-7188	47	9	in	in	ADP
fumecheng-7188	47	10	iso	iso	PROPN
fumecheng-7188	47	11	1101	1101	NUM
fumecheng-7188	47	12	[	[	X
fumecheng-7188	47	13	24	24	NUM
fumecheng-7188	47	14	]	]	PUNCT
fumecheng-7188	47	15	,	,	PUNCT
fumecheng-7188	47	16	the	the	DET
fumecheng-7188	47	17	surface	surface	NOUN
fumecheng-7188	47	18	profile	profile	NOUN
fumecheng-7188	47	19	error	error	NOUN
fumecheng-7188	47	20	can	can	AUX
fumecheng-7188	47	21	be	be	AUX
fumecheng-7188	47	22	defined	define	VERB
fumecheng-7188	47	23	by	by	ADP
fumecheng-7188	47	24	the	the	DET
fumecheng-7188	47	25	minimum	minimum	ADJ
fumecheng-7188	47	26	diameter	diameter	NOUN
fumecheng-7188	47	27	covering	cover	VERB
fumecheng-7188	47	28	all	all	DET
fumecheng-7188	47	29	measured	measured	ADJ
fumecheng-7188	47	30	points	point	NOUN
fumecheng-7188	47	31	of	of	ADP
fumecheng-7188	47	32	the	the	DET
fumecheng-7188	47	33	cluster	cluster	NOUN
fumecheng-7188	47	34	spheres	sphere	NOUN
fumecheng-7188	47	35	whose	whose	DET
fumecheng-7188	47	36	centers	center	NOUN
fumecheng-7188	47	37	lie	lie	VERB
fumecheng-7188	47	38	on	on	ADP
fumecheng-7188	47	39	the	the	DET
fumecheng-7188	47	40	design	design	NOUN
fumecheng-7188	47	41	model	model	NOUN
fumecheng-7188	47	42	.	.	PUNCT
fumecheng-7188	48	1	profile	profile	NOUN
fumecheng-7188	48	2	tolerance	tolerance	NOUN
fumecheng-7188	48	3	may	may	AUX
fumecheng-7188	48	4	be	be	AUX
fumecheng-7188	48	5	related	relate	VERB
fumecheng-7188	48	6	to	to	ADP
fumecheng-7188	48	7	a	a	DET
fumecheng-7188	48	8	basic	basic	ADJ
fumecheng-7188	48	9	surface	surface	NOUN
fumecheng-7188	48	10	;	;	PUNCT
fumecheng-7188	48	11	then	then	ADV
fumecheng-7188	48	12	its	its	PRON
fumecheng-7188	48	13	orientation	orientation	NOUN
fumecheng-7188	48	14	and	and	CCONJ
fumecheng-7188	48	15	position	position	NOUN
fumecheng-7188	48	16	are	be	AUX
fumecheng-7188	48	17	dependent	dependent	ADJ
fumecheng-7188	48	18	on	on	ADP
fumecheng-7188	48	19	the	the	DET
fumecheng-7188	48	20	definition	definition	NOUN
fumecheng-7188	48	21	of	of	ADP
fumecheng-7188	48	22	bases	basis	NOUN
fumecheng-7188	48	23	and	and	CCONJ
fumecheng-7188	48	24	base	base	NOUN
fumecheng-7188	48	25	-	-	PUNCT
fumecheng-7188	48	26	dependent	dependent	ADJ
fumecheng-7188	48	27	coordinate	coordinate	NOUN
fumecheng-7188	48	28	system	system	NOUN
fumecheng-7188	48	29	.	.	PUNCT
fumecheng-7188	49	1	researchers	researcher	NOUN
fumecheng-7188	49	2	have	have	AUX
fumecheng-7188	49	3	proposed	propose	VERB
fumecheng-7188	49	4	various	various	ADJ
fumecheng-7188	49	5	practical	practical	ADJ
fumecheng-7188	49	6	approaches	approach	NOUN
fumecheng-7188	49	7	towards	towards	ADP
fumecheng-7188	49	8	evaluating	evaluate	VERB
fumecheng-7188	49	9	form	form	NOUN
fumecheng-7188	49	10	deviations	deviation	NOUN
fumecheng-7188	49	11	of	of	ADP
fumecheng-7188	49	12	2d	2d	NUM
fumecheng-7188	49	13	contour	contour	NOUN
fumecheng-7188	49	14	profiles	profile	NOUN
fumecheng-7188	49	15	based	base	VERB
fumecheng-7188	49	16	on	on	ADP
fumecheng-7188	49	17	coordinate	coordinate	NOUN
fumecheng-7188	49	18	measurement	measurement	NOUN
fumecheng-7188	49	19	data	datum	NOUN
fumecheng-7188	49	20	.	.	PUNCT
fumecheng-7188	50	1	for	for	ADP
fumecheng-7188	50	2	example	example	NOUN
fumecheng-7188	50	3	,	,	PUNCT
fumecheng-7188	50	4	a	a	DET
fumecheng-7188	50	5	2d	2d	NOUN
fumecheng-7188	50	6	contour	contour	NOUN
fumecheng-7188	50	7	was	be	AUX
fumecheng-7188	50	8	divided	divide	VERB
fumecheng-7188	50	9	into	into	ADP
fumecheng-7188	50	10	straight	straight	ADJ
fumecheng-7188	50	11	and	and	CCONJ
fumecheng-7188	50	12	curved	curved	ADJ
fumecheng-7188	50	13	parts	part	NOUN
fumecheng-7188	50	14	[	[	X
fumecheng-7188	50	15	25	25	NUM
fumecheng-7188	50	16	]	]	PUNCT
fumecheng-7188	50	17	.	.	PUNCT
fumecheng-7188	51	1	there	there	PRON
fumecheng-7188	51	2	are	be	VERB
fumecheng-7188	51	3	reports	report	NOUN
fumecheng-7188	51	4	in	in	ADP
fumecheng-7188	51	5	which	which	PRON
fumecheng-7188	51	6	extracted	extract	VERB
fumecheng-7188	51	7	points	point	NOUN
fumecheng-7188	51	8	of	of	ADP
fumecheng-7188	51	9	curved	curved	ADJ
fumecheng-7188	51	10	profile	profile	NOUN
fumecheng-7188	51	11	deviated	deviate	VERB
fumecheng-7188	51	12	from	from	ADP
fumecheng-7188	51	13	reference	reference	NOUN
fumecheng-7188	51	14	data	datum	NOUN
fumecheng-7188	51	15	within	within	ADP
fumecheng-7188	51	16	±0.1	±0.1	PROPN
fumecheng-7188	51	17	mm	mm	NOUN
fumecheng-7188	52	1	[	[	X
fumecheng-7188	52	2	26	26	NUM
fumecheng-7188	52	3	]	]	PUNCT
fumecheng-7188	52	4	.	.	PUNCT
fumecheng-7188	53	1	in	in	ADP
fumecheng-7188	53	2	the	the	DET
fumecheng-7188	53	3	present	present	ADJ
fumecheng-7188	53	4	paper	paper	NOUN
fumecheng-7188	53	5	,	,	PUNCT
fumecheng-7188	53	6	we	we	PRON
fumecheng-7188	53	7	focused	focus	VERB
fumecheng-7188	53	8	on	on	ADP
fumecheng-7188	53	9	the	the	DET
fumecheng-7188	53	10	statistical	statistical	ADJ
fumecheng-7188	53	11	analysis	analysis	NOUN
fumecheng-7188	53	12	of	of	ADP
fumecheng-7188	53	13	the	the	DET
fumecheng-7188	53	14	results	result	NOUN
fumecheng-7188	53	15	obtained	obtain	VERB
fumecheng-7188	53	16	for	for	ADP
fumecheng-7188	53	17	the	the	DET
fumecheng-7188	53	18	curved	curved	ADJ
fumecheng-7188	53	19	2d	2d	PROPN
fumecheng-7188	53	20	profile	profile	NOUN
fumecheng-7188	53	21	with	with	ADP
fumecheng-7188	53	22	no	no	DET
fumecheng-7188	53	23	available	available	ADJ
fumecheng-7188	53	24	cad	cad	PROPN
fumecheng-7188	53	25	model	model	NOUN
fumecheng-7188	53	26	.	.	PUNCT
fumecheng-7188	54	1	the	the	DET
fumecheng-7188	54	2	measurement	measurement	NOUN
fumecheng-7188	54	3	results	result	NOUN
fumecheng-7188	54	4	appeared	appear	VERB
fumecheng-7188	54	5	to	to	PART
fumecheng-7188	54	6	be	be	AUX
fumecheng-7188	54	7	dependent	dependent	ADJ
fumecheng-7188	54	8	on	on	ADP
fumecheng-7188	54	9	the	the	DET
fumecheng-7188	54	10	scanning	scanning	NOUN
fumecheng-7188	54	11	parameters	parameter	NOUN
fumecheng-7188	54	12	,	,	PUNCT
fumecheng-7188	54	13	so	so	SCONJ
fumecheng-7188	54	14	that	that	SCONJ
fumecheng-7188	54	15	a	a	DET
fumecheng-7188	54	16	balance	balance	NOUN
fumecheng-7188	54	17	between	between	ADP
fumecheng-7188	54	18	accuracy	accuracy	NOUN
fumecheng-7188	54	19	demands	demand	NOUN
fumecheng-7188	54	20	and	and	CCONJ
fumecheng-7188	54	21	measurement	measurement	NOUN
fumecheng-7188	54	22	time	time	NOUN
fumecheng-7188	54	23	had	have	VERB
fumecheng-7188	54	24	to	to	PART
fumecheng-7188	54	25	be	be	AUX
fumecheng-7188	54	26	found	find	VERB
fumecheng-7188	54	27	.	.	PUNCT
fumecheng-7188	55	1	also	also	ADV
fumecheng-7188	55	2	the	the	DET
fumecheng-7188	55	3	problem	problem	NOUN
fumecheng-7188	55	4	of	of	ADP
fumecheng-7188	55	5	basic	basic	ADJ
fumecheng-7188	55	6	surface	surface	NOUN
fumecheng-7188	55	7	for	for	ADP
fumecheng-7188	55	8	measurements	measurement	NOUN
fumecheng-7188	55	9	was	be	AUX
fumecheng-7188	55	10	challenged	challenge	VERB
fumecheng-7188	55	11	in	in	ADP
fumecheng-7188	55	12	order	order	NOUN
fumecheng-7188	55	13	to	to	PART
fumecheng-7188	55	14	keep	keep	VERB
fumecheng-7188	55	15	consistence	consistence	NOUN
fumecheng-7188	55	16	of	of	ADP
fumecheng-7188	55	17	the	the	DET
fumecheng-7188	55	18	results	result	NOUN
fumecheng-7188	55	19	.	.	PUNCT
fumecheng-7188	56	1	2	2	X
fumecheng-7188	56	2	.	.	X
fumecheng-7188	56	3	materials	material	NOUN
fumecheng-7188	56	4	and	and	CCONJ
fumecheng-7188	56	5	methods	method	NOUN
fumecheng-7188	56	6	in	in	ADP
fumecheng-7188	56	7	the	the	DET
fumecheng-7188	56	8	research	research	NOUN
fumecheng-7188	56	9	studies	study	NOUN
fumecheng-7188	56	10	,	,	PUNCT
fumecheng-7188	56	11	a	a	DET
fumecheng-7188	56	12	cam	cam	NOUN
fumecheng-7188	56	13	with	with	ADP
fumecheng-7188	56	14	complex	complex	ADJ
fumecheng-7188	56	15	2d	2d	NUM
fumecheng-7188	56	16	profile	profile	NOUN
fumecheng-7188	56	17	curvature	curvature	NOUN
fumecheng-7188	56	18	was	be	AUX
fumecheng-7188	56	19	measured	measure	VERB
fumecheng-7188	56	20	.	.	PUNCT
fumecheng-7188	57	1	its	its	PRON
fumecheng-7188	57	2	dimensions	dimension	NOUN
fumecheng-7188	57	3	and	and	CCONJ
fumecheng-7188	57	4	tolerances	tolerance	NOUN
fumecheng-7188	57	5	are	be	AUX
fumecheng-7188	57	6	shown	show	VERB
fumecheng-7188	57	7	in	in	ADP
fumecheng-7188	57	8	fig	fig	NOUN
fumecheng-7188	57	9	.	.	PUNCT
fumecheng-7188	58	1	1	1	X
fumecheng-7188	58	2	.	.	X
fumecheng-7188	58	3	its	its	PRON
fumecheng-7188	58	4	form	form	NOUN
fumecheng-7188	58	5	tolerance	tolerance	NOUN
fumecheng-7188	58	6	was	be	AUX
fumecheng-7188	58	7	0.15	0.15	NUM
fumecheng-7188	58	8	mm	mm	NOUN
fumecheng-7188	58	9	,	,	PUNCT
fumecheng-7188	58	10	and	and	CCONJ
fumecheng-7188	58	11	roughness	roughness	NOUN
fumecheng-7188	58	12	of	of	ADP
fumecheng-7188	58	13	curved	curved	ADJ
fumecheng-7188	58	14	surface	surface	NOUN
fumecheng-7188	58	15	was	be	AUX
fumecheng-7188	58	16	limited	limit	VERB
fumecheng-7188	58	17	to	to	ADP
fumecheng-7188	58	18	ra	ra	PROPN
fumecheng-7188	59	1	=	=	NUM
fumecheng-7188	59	2	1.25	1.25	NUM
fumecheng-7188	59	3	μm	μm	NOUN
fumecheng-7188	59	4	and	and	CCONJ
fumecheng-7188	59	5	rz	rz	NOUN
fumecheng-7188	59	6	=	=	SYM
fumecheng-7188	59	7	6.3	6.3	NUM
fumecheng-7188	59	8	μm	μm	NOUN
fumecheng-7188	59	9	.	.	PUNCT
fumecheng-7188	60	1	using	use	VERB
fumecheng-7188	60	2	the	the	DET
fumecheng-7188	60	3	data	datum	NOUN
fumecheng-7188	60	4	from	from	ADP
fumecheng-7188	60	5	fig	fig	NOUN
fumecheng-7188	60	6	.	.	PUNCT
fumecheng-7188	61	1	1	1	NUM
fumecheng-7188	61	2	,	,	PUNCT
fumecheng-7188	61	3	theoretical	theoretical	ADJ
fumecheng-7188	61	4	(	(	PUNCT
fumecheng-7188	61	5	reference	reference	NOUN
fumecheng-7188	61	6	)	)	PUNCT
fumecheng-7188	61	7	profile	profile	NOUN
fumecheng-7188	61	8	was	be	AUX
fumecheng-7188	61	9	generated	generate	VERB
fumecheng-7188	61	10	as	as	ADP
fumecheng-7188	61	11	a	a	DET
fumecheng-7188	61	12	file	file	NOUN
fumecheng-7188	61	13	*	*	NOUN
fumecheng-7188	61	14	.dxf	.dxf	NOUN
fumecheng-7188	61	15	using	use	VERB
fumecheng-7188	61	16	the	the	DET
fumecheng-7188	61	17	program	program	NOUN
fumecheng-7188	61	18	solidworks	solidworks	PROPN
fumecheng-7188	61	19	2019	2019	NUM
fumecheng-7188	61	20	.	.	PUNCT
fumecheng-7188	62	1	fig	fig	NOUN
fumecheng-7188	62	2	.	.	PUNCT
fumecheng-7188	63	1	1	1	NUM
fumecheng-7188	63	2	technical	technical	ADJ
fumecheng-7188	63	3	drawing	drawing	NOUN
fumecheng-7188	63	4	of	of	ADP
fumecheng-7188	63	5	the	the	DET
fumecheng-7188	63	6	measured	measured	ADJ
fumecheng-7188	63	7	cam	cam	NOUN
fumecheng-7188	63	8	124	124	NUM
fumecheng-7188	63	9	t.	t.	NOUN
fumecheng-7188	63	10	mazur	mazur	PROPN
fumecheng-7188	63	11	,	,	PUNCT
fumecheng-7188	63	12	m.	m.	PROPN
fumecheng-7188	63	13	rucki	rucki	PROPN
fumecheng-7188	63	14	,	,	PUNCT
fumecheng-7188	63	15	y.	y.	PROPN
fumecheng-7188	63	16	gutsalenko	gutsalenko	PROPN
fumecheng-7188	63	17	the	the	DET
fumecheng-7188	63	18	contour	contour	NOUN
fumecheng-7188	63	19	of	of	ADP
fumecheng-7188	63	20	the	the	DET
fumecheng-7188	63	21	cam	cam	NOUN
fumecheng-7188	63	22	was	be	AUX
fumecheng-7188	63	23	generated	generate	VERB
fumecheng-7188	63	24	using	use	VERB
fumecheng-7188	63	25	the	the	DET
fumecheng-7188	63	26	technical	technical	ADJ
fumecheng-7188	63	27	drawing	drawing	NOUN
fumecheng-7188	63	28	,	,	PUNCT
fumecheng-7188	63	29	and	and	CCONJ
fumecheng-7188	63	30	in	in	ADP
fumecheng-7188	63	31	form	form	NOUN
fumecheng-7188	63	32	of	of	ADP
fumecheng-7188	63	33	*	*	NOUN
fumecheng-7188	63	34	.dxf	.dxf	NOUN
fumecheng-7188	63	35	file	file	NOUN
fumecheng-7188	63	36	was	be	AUX
fumecheng-7188	63	37	input	input	ADJ
fumecheng-7188	63	38	to	to	ADP
fumecheng-7188	63	39	the	the	DET
fumecheng-7188	63	40	cmm	cmm	PROPN
fumecheng-7188	63	41	control	control	PROPN
fumecheng-7188	63	42	program	program	PROPN
fumecheng-7188	63	43	.	.	PUNCT
fumecheng-7188	64	1	in	in	ADP
fumecheng-7188	64	2	the	the	DET
fumecheng-7188	64	3	file	file	NOUN
fumecheng-7188	64	4	,	,	PUNCT
fumecheng-7188	64	5	2829	2829	NUM
fumecheng-7188	64	6	theoretical	theoretical	ADJ
fumecheng-7188	64	7	(	(	PUNCT
fumecheng-7188	64	8	reference	reference	NOUN
fumecheng-7188	64	9	)	)	PUNCT
fumecheng-7188	64	10	points	point	NOUN
fumecheng-7188	64	11	constituted	constitute	VERB
fumecheng-7188	64	12	the	the	DET
fumecheng-7188	64	13	profile	profile	NOUN
fumecheng-7188	64	14	with	with	ADP
fumecheng-7188	64	15	coordinates	coordinate	NOUN
fumecheng-7188	64	16	x	x	NOUN
fumecheng-7188	64	17	,	,	PUNCT
fumecheng-7188	64	18	y	y	PROPN
fumecheng-7188	64	19	,	,	PUNCT
fumecheng-7188	64	20	z	z	NOUN
fumecheng-7188	64	21	in	in	ADP
fumecheng-7188	64	22	the	the	DET
fumecheng-7188	64	23	local	local	ADJ
fumecheng-7188	64	24	coordinate	coordinate	NOUN
fumecheng-7188	64	25	system	system	NOUN
fumecheng-7188	64	26	(	(	PUNCT
fumecheng-7188	64	27	lcs	lcs	NOUN
fumecheng-7188	64	28	)	)	PUNCT
fumecheng-7188	64	29	defined	define	VERB
fumecheng-7188	64	30	according	accord	VERB
fumecheng-7188	64	31	to	to	ADP
fumecheng-7188	64	32	the	the	DET
fumecheng-7188	64	33	technical	technical	ADJ
fumecheng-7188	64	34	drawing	drawing	NOUN
fumecheng-7188	64	35	.	.	PUNCT
fumecheng-7188	65	1	the	the	DET
fumecheng-7188	65	2	points	point	NOUN
fumecheng-7188	65	3	were	be	AUX
fumecheng-7188	65	4	located	locate	VERB
fumecheng-7188	65	5	approximately	approximately	ADV
fumecheng-7188	65	6	uniformly	uniformly	ADV
fumecheng-7188	65	7	1	1	NUM
fumecheng-7188	65	8	mm	mm	NOUN
fumecheng-7188	65	9	below	below	ADP
fumecheng-7188	65	10	the	the	DET
fumecheng-7188	65	11	base	base	NOUN
fumecheng-7188	65	12	surface	surface	NOUN
fumecheng-7188	65	13	of	of	ADP
fumecheng-7188	65	14	the	the	DET
fumecheng-7188	65	15	cam	cam	NOUN
fumecheng-7188	65	16	,	,	PUNCT
fumecheng-7188	65	17	i.e.	i.e.	X
fumecheng-7188	65	18	z	z	NOUN
fumecheng-7188	65	19	=	=	SYM
fumecheng-7188	65	20	-1	-1	PUNCT
fumecheng-7188	65	21	mm	mm	INTJ
fumecheng-7188	65	22	for	for	ADP
fumecheng-7188	65	23	each	each	DET
fumecheng-7188	65	24	point	point	NOUN
fumecheng-7188	65	25	.	.	PUNCT
fumecheng-7188	66	1	the	the	DET
fumecheng-7188	66	2	length	length	NOUN
fumecheng-7188	66	3	of	of	ADP
fumecheng-7188	66	4	the	the	DET
fumecheng-7188	66	5	contour	contour	NOUN
fumecheng-7188	66	6	was	be	AUX
fumecheng-7188	66	7	lc	lc	NOUN
fumecheng-7188	66	8	=	=	SYM
fumecheng-7188	66	9	123,49	123,49	NUM
fumecheng-7188	67	1	mm	mm	NOUN
fumecheng-7188	67	2	.	.	PUNCT
fumecheng-7188	68	1	the	the	DET
fumecheng-7188	68	2	measurements	measurement	NOUN
fumecheng-7188	68	3	were	be	AUX
fumecheng-7188	68	4	performed	perform	VERB
fumecheng-7188	68	5	with	with	ADP
fumecheng-7188	68	6	the	the	DET
fumecheng-7188	68	7	cmm	cmm	PROPN
fumecheng-7188	68	8	mitutoyo	mitutoyo	PROPN
fumecheng-7188	68	9	crysta	crysta	PROPN
fumecheng-7188	68	10	–	–	PUNCT
fumecheng-7188	68	11	apex	apex	NOUN
fumecheng-7188	68	12	s	s	PART
fumecheng-7188	68	13	7106	7106	NUM
fumecheng-7188	68	14	.	.	PUNCT
fumecheng-7188	69	1	it	it	PRON
fumecheng-7188	69	2	is	be	AUX
fumecheng-7188	69	3	a	a	DET
fumecheng-7188	69	4	high	high	ADJ
fumecheng-7188	69	5	-	-	PUNCT
fumecheng-7188	69	6	accuracy	accuracy	NOUN
fumecheng-7188	69	7	cnc	cnc	ADJ
fumecheng-7188	69	8	coordinate	coordinate	NOUN
fumecheng-7188	69	9	measuring	measure	VERB
fumecheng-7188	69	10	machine	machine	NOUN
fumecheng-7188	69	11	that	that	PRON
fumecheng-7188	69	12	guarantees	guarantee	VERB
fumecheng-7188	69	13	a	a	DET
fumecheng-7188	69	14	maximum	maximum	ADJ
fumecheng-7188	69	15	permissible	permissible	ADJ
fumecheng-7188	69	16	error	error	NOUN
fumecheng-7188	69	17	defined	define	VERB
fumecheng-7188	69	18	by	by	ADP
fumecheng-7188	69	19	iso	iso	NOUN
fumecheng-7188	69	20	10360	10360	NUM
fumecheng-7188	69	21	-	-	SYM
fumecheng-7188	69	22	2:2009	2:2009	NUM
fumecheng-7188	69	23	of	of	ADP
fumecheng-7188	69	24	e0,mpe	e0,mpe	NOUN
fumecheng-7188	69	25	=	=	SYM
fumecheng-7188	69	26	(	(	PUNCT
fumecheng-7188	69	27	1.7	1.7	NUM
fumecheng-7188	69	28	+	+	NOUN
fumecheng-7188	69	29	3l/1000	3l/1000	NOUN
fumecheng-7188	69	30	)	)	PUNCT
fumecheng-7188	69	31	μm	μm	NOUN
fumecheng-7188	69	32	at	at	ADP
fumecheng-7188	69	33	ambient	ambient	ADJ
fumecheng-7188	69	34	temperature	temperature	NOUN
fumecheng-7188	69	35	20	20	NUM
fumecheng-7188	69	36	±2	±2	NOUN
fumecheng-7188	69	37	°	°	NOUN
fumecheng-7188	69	38	c	c	NOUN
fumecheng-7188	69	39	.	.	PUNCT
fumecheng-7188	70	1	l	l	NOUN
fumecheng-7188	70	2	stands	stand	VERB
fumecheng-7188	70	3	for	for	ADP
fumecheng-7188	70	4	the	the	DET
fumecheng-7188	70	5	selected	select	VERB
fumecheng-7188	70	6	measuring	measuring	NOUN
fumecheng-7188	70	7	length	length	NOUN
fumecheng-7188	70	8	in	in	ADP
fumecheng-7188	70	9	mm	mm	PROPN
fumecheng-7188	70	10	.	.	PUNCT
fumecheng-7188	71	1	the	the	DET
fumecheng-7188	71	2	measuring	measure	VERB
fumecheng-7188	71	3	range	range	NOUN
fumecheng-7188	71	4	in	in	ADP
fumecheng-7188	71	5	three	three	NUM
fumecheng-7188	71	6	axis	axis	NOUN
fumecheng-7188	71	7	is	be	AUX
fumecheng-7188	71	8	x	x	NOUN
fumecheng-7188	71	9	=	=	SYM
fumecheng-7188	71	10	700	700	NUM
fumecheng-7188	71	11	;	;	PUNCT
fumecheng-7188	71	12	y	y	PROPN
fumecheng-7188	71	13	=	=	SYM
fumecheng-7188	71	14	1000	1000	NUM
fumecheng-7188	71	15	;	;	PUNCT
fumecheng-7188	71	16	z	z	NOUN
fumecheng-7188	71	17	=	=	SYM
fumecheng-7188	71	18	600	600	NUM
fumecheng-7188	71	19	mm	mm	NOUN
fumecheng-7188	71	20	,	,	PUNCT
fumecheng-7188	71	21	3d	3d	NUM
fumecheng-7188	71	22	acceleration	acceleration	NOUN
fumecheng-7188	71	23	a	a	DET
fumecheng-7188	71	24	=	=	SYM
fumecheng-7188	71	25	2309	2309	NUM
fumecheng-7188	71	26	mm	mm	PROPN
fumecheng-7188	71	27	/	/	SYM
fumecheng-7188	71	28	s2	s2	PROPN
fumecheng-7188	71	29	,	,	PUNCT
fumecheng-7188	71	30	and	and	CCONJ
fumecheng-7188	71	31	linear	linear	ADJ
fumecheng-7188	71	32	velocity	velocity	NOUN
fumecheng-7188	71	33	in	in	ADP
fumecheng-7188	71	34	three	three	NUM
fumecheng-7188	71	35	directions	direction	NOUN
fumecheng-7188	71	36	x	x	X
fumecheng-7188	71	37	,	,	PUNCT
fumecheng-7188	71	38	y	y	PROPN
fumecheng-7188	71	39	,	,	PUNCT
fumecheng-7188	71	40	z	z	PROPN
fumecheng-7188	71	41	is	be	AUX
fumecheng-7188	71	42	v	v	NOUN
fumecheng-7188	71	43	=	=	SYM
fumecheng-7188	71	44	519	519	NUM
fumecheng-7188	71	45	mm	mm	NOUN
fumecheng-7188	71	46	/	/	SYM
fumecheng-7188	71	47	s.	s.	PROPN
fumecheng-7188	71	48	moreover	moreover	ADV
fumecheng-7188	71	49	,	,	PUNCT
fumecheng-7188	71	50	the	the	DET
fumecheng-7188	71	51	cmm	cmm	NOUN
fumecheng-7188	71	52	has	have	VERB
fumecheng-7188	71	53	temperature	temperature	NOUN
fumecheng-7188	71	54	compensation	compensation	NOUN
fumecheng-7188	71	55	function	function	NOUN
fumecheng-7188	71	56	in	in	ADP
fumecheng-7188	71	57	the	the	DET
fumecheng-7188	71	58	range	range	NOUN
fumecheng-7188	71	59	of	of	ADP
fumecheng-7188	71	60	16÷26	16÷26	NUM
fumecheng-7188	71	61	°	°	ADP
fumecheng-7188	71	62	c	c	PROPN
fumecheng-7188	71	63	,	,	PUNCT
fumecheng-7188	71	64	which	which	PRON
fumecheng-7188	71	65	makes	make	VERB
fumecheng-7188	71	66	it	it	PRON
fumecheng-7188	71	67	suitable	suitable	ADJ
fumecheng-7188	71	68	for	for	ADP
fumecheng-7188	71	69	working	work	VERB
fumecheng-7188	71	70	in	in	ADP
fumecheng-7188	71	71	the	the	DET
fumecheng-7188	71	72	industrial	industrial	ADJ
fumecheng-7188	71	73	conditions	condition	NOUN
fumecheng-7188	71	74	.	.	PUNCT
fumecheng-7188	72	1	the	the	DET
fumecheng-7188	72	2	machine	machine	NOUN
fumecheng-7188	72	3	can	can	AUX
fumecheng-7188	72	4	be	be	AUX
fumecheng-7188	72	5	equipped	equip	VERB
fumecheng-7188	72	6	with	with	ADP
fumecheng-7188	72	7	contact	contact	NOUN
fumecheng-7188	72	8	scanning	scanning	NOUN
fumecheng-7188	72	9	probe	probe	NOUN
fumecheng-7188	72	10	,	,	PUNCT
fumecheng-7188	72	11	non	non	ADJ
fumecheng-7188	72	12	-	-	ADJ
fumecheng-7188	72	13	contact	contact	ADJ
fumecheng-7188	72	14	laser	laser	NOUN
fumecheng-7188	72	15	probe	probe	NOUN
fumecheng-7188	72	16	or	or	CCONJ
fumecheng-7188	72	17	vision	vision	NOUN
fumecheng-7188	72	18	probe	probe	NOUN
fumecheng-7188	72	19	[	[	X
fumecheng-7188	72	20	27	27	NUM
fumecheng-7188	72	21	]	]	PUNCT
fumecheng-7188	72	22	.	.	PUNCT
fumecheng-7188	73	1	scanning	scan	VERB
fumecheng-7188	73	2	mode	mode	NOUN
fumecheng-7188	73	3	makes	make	VERB
fumecheng-7188	73	4	it	it	PRON
fumecheng-7188	73	5	possible	possible	ADJ
fumecheng-7188	73	6	to	to	PART
fumecheng-7188	73	7	perform	perform	VERB
fumecheng-7188	73	8	measurement	measurement	NOUN
fumecheng-7188	73	9	with	with	ADP
fumecheng-7188	73	10	0.05	0.05	NUM
fumecheng-7188	73	11	-	-	SYM
fumecheng-7188	73	12	1.0	1.0	NUM
fumecheng-7188	73	13	point	point	NOUN
fumecheng-7188	73	14	-	-	PUNCT
fumecheng-7188	73	15	point	point	NOUN
fumecheng-7188	73	16	step	step	NOUN
fumecheng-7188	73	17	or	or	CCONJ
fumecheng-7188	73	18	distance	distance	NOUN
fumecheng-7188	73	19	between	between	ADP
fumecheng-7188	73	20	points	point	NOUN
fumecheng-7188	73	21	,	,	PUNCT
fumecheng-7188	73	22	scanning	scan	VERB
fumecheng-7188	73	23	speeds	speed	NOUN
fumecheng-7188	73	24	between	between	ADP
fumecheng-7188	73	25	0.5	0.5	NUM
fumecheng-7188	73	26	and	and	CCONJ
fumecheng-7188	73	27	4	4	NUM
fumecheng-7188	73	28	mm	mm	NOUN
fumecheng-7188	73	29	/	/	SYM
fumecheng-7188	73	30	s	s	PROPN
fumecheng-7188	73	31	,	,	PUNCT
fumecheng-7188	73	32	and	and	CCONJ
fumecheng-7188	73	33	permissible	permissible	ADJ
fumecheng-7188	73	34	probe	probe	NOUN
fumecheng-7188	73	35	deflection	deflection	NOUN
fumecheng-7188	73	36	in	in	ADP
fumecheng-7188	73	37	the	the	DET
fumecheng-7188	73	38	range	range	NOUN
fumecheng-7188	73	39	from	from	ADP
fumecheng-7188	73	40	0.15	0.15	NUM
fumecheng-7188	73	41	to	to	ADP
fumecheng-7188	73	42	0.4	0.4	NUM
fumecheng-7188	73	43	mm	mm	NOUN
fumecheng-7188	73	44	.	.	PUNCT
fumecheng-7188	74	1	fixation	fixation	NOUN
fumecheng-7188	74	2	of	of	ADP
fumecheng-7188	74	3	the	the	DET
fumecheng-7188	74	4	cam	cam	NOUN
fumecheng-7188	74	5	with	with	ADP
fumecheng-7188	74	6	defined	define	VERB
fumecheng-7188	74	7	lcs	lcs	PROPN
fumecheng-7188	74	8	is	be	AUX
fumecheng-7188	74	9	shown	show	VERB
fumecheng-7188	74	10	in	in	ADP
fumecheng-7188	74	11	fig	fig	NOUN
fumecheng-7188	74	12	2	2	NUM
fumecheng-7188	74	13	.	.	PUNCT
fumecheng-7188	74	14	fig	fig	NOUN
fumecheng-7188	74	15	.	.	PUNCT
fumecheng-7188	75	1	3	3	NUM
fumecheng-7188	75	2	presents	present	VERB
fumecheng-7188	75	3	the	the	DET
fumecheng-7188	75	4	initial	initial	ADJ
fumecheng-7188	75	5	window	window	NOUN
fumecheng-7188	75	6	of	of	ADP
fumecheng-7188	75	7	cmm	cmm	NOUN
fumecheng-7188	75	8	for	for	ADP
fumecheng-7188	75	9	scanning	scanning	NOUN
fumecheng-7188	75	10	of	of	ADP
fumecheng-7188	75	11	an	an	DET
fumecheng-7188	75	12	outer	outer	ADJ
fumecheng-7188	75	13	closed	closed	ADJ
fumecheng-7188	75	14	contour	contour	NOUN
fumecheng-7188	75	15	with	with	ADP
fumecheng-7188	75	16	the	the	DET
fumecheng-7188	75	17	set	set	NOUN
fumecheng-7188	75	18	values	value	NOUN
fumecheng-7188	75	19	described	describe	VERB
fumecheng-7188	75	20	below	below	ADV
fumecheng-7188	75	21	in	in	ADP
fumecheng-7188	75	22	the	the	DET
fumecheng-7188	75	23	text	text	NOUN
fumecheng-7188	75	24	.	.	PUNCT
fumecheng-7188	76	1	fig	fig	NOUN
fumecheng-7188	76	2	.	.	PUNCT
fumecheng-7188	77	1	2	2	NUM
fumecheng-7188	77	2	fixation	fixation	NOUN
fumecheng-7188	77	3	of	of	ADP
fumecheng-7188	77	4	the	the	DET
fumecheng-7188	77	5	measured	measured	ADJ
fumecheng-7188	77	6	cam	cam	NOUN
fumecheng-7188	77	7	on	on	ADP
fumecheng-7188	77	8	the	the	DET
fumecheng-7188	77	9	cmm	cmm	PROPN
fumecheng-7188	77	10	table	table	NOUN
fumecheng-7188	77	11	accuracy	accuracy	NOUN
fumecheng-7188	77	12	analysis	analysis	NOUN
fumecheng-7188	77	13	of	of	ADP
fumecheng-7188	77	14	the	the	DET
fumecheng-7188	77	15	curved	curved	ADJ
fumecheng-7188	77	16	profile	profile	PROPN
fumecheng-7188	77	17	measurement	measurement	NOUN
fumecheng-7188	77	18	with	with	ADP
fumecheng-7188	77	19	cmm	cmm	NOUN
fumecheng-7188	77	20	:	:	PUNCT
fumecheng-7188	77	21	a	a	DET
fumecheng-7188	77	22	case	case	NOUN
fumecheng-7188	77	23	study	study	NOUN
fumecheng-7188	77	24	125	125	NUM
fumecheng-7188	77	25	to	to	PART
fumecheng-7188	77	26	perform	perform	VERB
fumecheng-7188	77	27	the	the	DET
fumecheng-7188	77	28	experiments	experiment	NOUN
fumecheng-7188	77	29	,	,	PUNCT
fumecheng-7188	77	30	control	control	NOUN
fumecheng-7188	77	31	software	software	PROPN
fumecheng-7188	77	32	mcosmos	mcosmos	PROPN
fumecheng-7188	77	33	was	be	AUX
fumecheng-7188	77	34	used	use	VERB
fumecheng-7188	77	35	.	.	PUNCT
fumecheng-7188	78	1	in	in	ADP
fumecheng-7188	78	2	this	this	DET
fumecheng-7188	78	3	program	program	NOUN
fumecheng-7188	78	4	,	,	PUNCT
fumecheng-7188	78	5	ready	ready	ADJ
fumecheng-7188	78	6	scripts	script	NOUN
fumecheng-7188	78	7	are	be	AUX
fumecheng-7188	78	8	available	available	ADJ
fumecheng-7188	78	9	for	for	ADP
fumecheng-7188	78	10	the	the	DET
fumecheng-7188	78	11	measurement	measurement	NOUN
fumecheng-7188	78	12	of	of	ADP
fumecheng-7188	78	13	all	all	DET
fumecheng-7188	78	14	standardized	standardize	VERB
fumecheng-7188	78	15	geometrical	geometrical	ADJ
fumecheng-7188	78	16	tolerances	tolerance	NOUN
fumecheng-7188	78	17	,	,	PUNCT
fumecheng-7188	78	18	as	as	ADV
fumecheng-7188	78	19	well	well	ADV
fumecheng-7188	78	20	as	as	ADP
fumecheng-7188	78	21	the	the	DET
fumecheng-7188	78	22	measurement	measurement	NOUN
fumecheng-7188	78	23	of	of	ADP
fumecheng-7188	78	24	complex	complex	ADJ
fumecheng-7188	78	25	shapes	shape	NOUN
fumecheng-7188	78	26	in	in	ADP
fumecheng-7188	78	27	local	local	ADJ
fumecheng-7188	78	28	coordinates	coordinate	NOUN
fumecheng-7188	78	29	.	.	PUNCT
fumecheng-7188	79	1	before	before	ADP
fumecheng-7188	79	2	the	the	DET
fumecheng-7188	79	3	measurement	measurement	NOUN
fumecheng-7188	79	4	,	,	PUNCT
fumecheng-7188	79	5	a	a	DET
fumecheng-7188	79	6	fixture	fixture	NOUN
fumecheng-7188	79	7	was	be	AUX
fumecheng-7188	79	8	made	make	VERB
fumecheng-7188	79	9	so	so	SCONJ
fumecheng-7188	79	10	that	that	SCONJ
fumecheng-7188	79	11	the	the	DET
fumecheng-7188	79	12	entire	entire	ADJ
fumecheng-7188	79	13	profile	profile	NOUN
fumecheng-7188	79	14	could	could	AUX
fumecheng-7188	79	15	be	be	AUX
fumecheng-7188	79	16	measured	measure	VERB
fumecheng-7188	79	17	in	in	ADP
fumecheng-7188	79	18	one	one	NUM
fumecheng-7188	79	19	fixation	fixation	NOUN
fumecheng-7188	79	20	with	with	ADP
fumecheng-7188	79	21	one	one	NUM
fumecheng-7188	79	22	probe	probe	NOUN
fumecheng-7188	79	23	.	.	PUNCT
fumecheng-7188	80	1	the	the	DET
fumecheng-7188	80	2	probe	probe	NOUN
fumecheng-7188	80	3	was	be	AUX
fumecheng-7188	80	4	calibrated	calibrate	VERB
fumecheng-7188	80	5	with	with	ADP
fumecheng-7188	80	6	the	the	DET
fumecheng-7188	80	7	calibration	calibration	NOUN
fumecheng-7188	80	8	sphere	sphere	ADV
fumecheng-7188	80	9	,	,	PUNCT
fumecheng-7188	80	10	and	and	CCONJ
fumecheng-7188	80	11	a	a	DET
fumecheng-7188	80	12	local	local	ADJ
fumecheng-7188	80	13	coordinate	coordinate	NOUN
fumecheng-7188	80	14	system	system	NOUN
fumecheng-7188	80	15	(	(	PUNCT
fumecheng-7188	80	16	lcs	lcs	NOUN
fumecheng-7188	80	17	)	)	PUNCT
fumecheng-7188	80	18	was	be	AUX
fumecheng-7188	80	19	defined	define	VERB
fumecheng-7188	80	20	according	accord	VERB
fumecheng-7188	80	21	to	to	ADP
fumecheng-7188	80	22	the	the	DET
fumecheng-7188	80	23	tolerance	tolerance	NOUN
fumecheng-7188	80	24	data	datum	NOUN
fumecheng-7188	80	25	provided	provide	VERB
fumecheng-7188	80	26	in	in	ADP
fumecheng-7188	80	27	the	the	DET
fumecheng-7188	80	28	drawing	drawing	NOUN
fumecheng-7188	80	29	fig	fig	NOUN
fumecheng-7188	80	30	2	2	NUM
fumecheng-7188	80	31	.	.	PUNCT
fumecheng-7188	81	1	the	the	DET
fumecheng-7188	81	2	lcs	lcs	PROPN
fumecheng-7188	81	3	definition	definition	NOUN
fumecheng-7188	81	4	covered	cover	VERB
fumecheng-7188	81	5	following	follow	VERB
fumecheng-7188	81	6	elements	element	NOUN
fumecheng-7188	81	7	:	:	PUNCT
fumecheng-7188	81	8	▪	▪	ADJ
fumecheng-7188	81	9	base	base	NOUN
fumecheng-7188	81	10	a	a	PRON
fumecheng-7188	81	11	as	as	ADP
fumecheng-7188	81	12	a	a	DET
fumecheng-7188	81	13	head	head	NOUN
fumecheng-7188	81	14	surface	surface	NOUN
fumecheng-7188	81	15	of	of	ADP
fumecheng-7188	81	16	the	the	DET
fumecheng-7188	81	17	measured	measure	VERB
fumecheng-7188	81	18	cam	cam	NOUN
fumecheng-7188	81	19	became	become	VERB
fumecheng-7188	81	20	the	the	DET
fumecheng-7188	81	21	main	main	ADJ
fumecheng-7188	81	22	surface	surface	NOUN
fumecheng-7188	81	23	of	of	ADP
fumecheng-7188	81	24	the	the	DET
fumecheng-7188	81	25	lcs	lcs	NOUN
fumecheng-7188	81	26	,	,	PUNCT
fumecheng-7188	81	27	it	it	PRON
fumecheng-7188	81	28	defined	define	VERB
fumecheng-7188	81	29	axes	axis	NOUN
fumecheng-7188	81	30	x	x	X
fumecheng-7188	81	31	and	and	CCONJ
fumecheng-7188	81	32	y	y	PROPN
fumecheng-7188	81	33	from	from	ADP
fumecheng-7188	81	34	4	4	NUM
fumecheng-7188	81	35	measuring	measure	VERB
fumecheng-7188	81	36	points	point	NOUN
fumecheng-7188	81	37	,	,	PUNCT
fumecheng-7188	81	38	▪	▪	ADJ
fumecheng-7188	81	39	base	base	NOUN
fumecheng-7188	81	40	b	b	PROPN
fumecheng-7188	81	41	defined	define	VERB
fumecheng-7188	81	42	lcs	lcs	PROPN
fumecheng-7188	81	43	center	center	NOUN
fumecheng-7188	81	44	in	in	ADP
fumecheng-7188	81	45	the	the	DET
fumecheng-7188	81	46	center	center	NOUN
fumecheng-7188	81	47	of	of	ADP
fumecheng-7188	81	48	the	the	DET
fumecheng-7188	81	49	hole	hole	NOUN
fumecheng-7188	81	50	∅20	∅20	PROPN
fumecheng-7188	81	51	,	,	PUNCT
fumecheng-7188	81	52	using	use	VERB
fumecheng-7188	81	53	4	4	NUM
fumecheng-7188	81	54	points	point	NOUN
fumecheng-7188	81	55	of	of	ADP
fumecheng-7188	81	56	the	the	DET
fumecheng-7188	81	57	circle	circle	NOUN
fumecheng-7188	81	58	,	,	PUNCT
fumecheng-7188	81	59	▪	▪	ADJ
fumecheng-7188	81	60	base	base	NOUN
fumecheng-7188	81	61	c	c	NOUN
fumecheng-7188	81	62	as	as	ADP
fumecheng-7188	81	63	a	a	DET
fumecheng-7188	81	64	line	line	NOUN
fumecheng-7188	81	65	connecting	connect	VERB
fumecheng-7188	81	66	three	three	NUM
fumecheng-7188	81	67	points	point	NOUN
fumecheng-7188	81	68	,	,	PUNCT
fumecheng-7188	81	69	two	two	NUM
fumecheng-7188	81	70	of	of	ADP
fumecheng-7188	81	71	them	they	PRON
fumecheng-7188	81	72	lay	lie	VERB
fumecheng-7188	81	73	in	in	ADP
fumecheng-7188	81	74	the	the	DET
fumecheng-7188	81	75	bisector	bisector	NOUN
fumecheng-7188	81	76	of	of	ADP
fumecheng-7188	81	77	the	the	DET
fumecheng-7188	81	78	first	first	ADJ
fumecheng-7188	81	79	smaller	small	ADJ
fumecheng-7188	81	80	base	base	NOUN
fumecheng-7188	81	81	hole	hole	NOUN
fumecheng-7188	81	82	and	and	CCONJ
fumecheng-7188	81	83	the	the	DET
fumecheng-7188	81	84	third	third	ADJ
fumecheng-7188	81	85	one	one	NOUN
fumecheng-7188	81	86	was	be	AUX
fumecheng-7188	81	87	the	the	DET
fumecheng-7188	81	88	center	center	NOUN
fumecheng-7188	81	89	of	of	ADP
fumecheng-7188	81	90	the	the	DET
fumecheng-7188	81	91	second	second	ADJ
fumecheng-7188	81	92	smaller	small	ADJ
fumecheng-7188	81	93	base	base	NOUN
fumecheng-7188	81	94	hole	hole	NOUN
fumecheng-7188	81	95	;	;	PUNCT
fumecheng-7188	81	96	it	it	PRON
fumecheng-7188	81	97	was	be	AUX
fumecheng-7188	81	98	moved	move	VERB
fumecheng-7188	81	99	in	in	ADP
fumecheng-7188	81	100	parallel	parallel	NOUN
fumecheng-7188	81	101	up	up	ADP
fumecheng-7188	81	102	to	to	ADP
fumecheng-7188	81	103	base	base	NOUN
fumecheng-7188	81	104	b	b	PROPN
fumecheng-7188	81	105	become	become	VERB
fumecheng-7188	81	106	axis	axis	ADJ
fumecheng-7188	81	107	y	y	NOUN
fumecheng-7188	81	108	,	,	PUNCT
fumecheng-7188	81	109	▪	▪	ADJ
fumecheng-7188	81	110	remaining	remain	VERB
fumecheng-7188	81	111	axes	axis	NOUN
fumecheng-7188	81	112	x	x	PUNCT
fumecheng-7188	81	113	and	and	CCONJ
fumecheng-7188	81	114	y	y	PROPN
fumecheng-7188	81	115	are	be	AUX
fumecheng-7188	81	116	derived	derive	VERB
fumecheng-7188	81	117	from	from	ADP
fumecheng-7188	81	118	the	the	DET
fumecheng-7188	81	119	right	right	ADJ
fumecheng-7188	81	120	-	-	PUNCT
fumecheng-7188	81	121	hand	hand	NOUN
fumecheng-7188	81	122	coordinate	coordinate	NOUN
fumecheng-7188	81	123	system	system	NOUN
fumecheng-7188	81	124	.	.	PUNCT
fumecheng-7188	82	1	fig	fig	NOUN
fumecheng-7188	82	2	.	.	PUNCT
fumecheng-7188	83	1	3	3	NUM
fumecheng-7188	83	2	window	window	NOUN
fumecheng-7188	83	3	of	of	ADP
fumecheng-7188	83	4	the	the	DET
fumecheng-7188	83	5	mcosmos	mcosmos	PROPN
fumecheng-7188	83	6	program	program	NOUN
fumecheng-7188	83	7	for	for	ADP
fumecheng-7188	83	8	the	the	DET
fumecheng-7188	83	9	measurement	measurement	NOUN
fumecheng-7188	83	10	parameters	parameter	NOUN
fumecheng-7188	83	11	during	during	ADP
fumecheng-7188	83	12	the	the	DET
fumecheng-7188	83	13	measurement	measurement	NOUN
fumecheng-7188	83	14	,	,	PUNCT
fumecheng-7188	83	15	the	the	DET
fumecheng-7188	83	16	cmm	cmm	PROPN
fumecheng-7188	83	17	program	program	NOUN
fumecheng-7188	83	18	written	write	VERB
fumecheng-7188	83	19	for	for	ADP
fumecheng-7188	83	20	that	that	DET
fumecheng-7188	83	21	specific	specific	ADJ
fumecheng-7188	83	22	purpose	purpose	NOUN
fumecheng-7188	83	23	is	be	AUX
fumecheng-7188	83	24	collecting	collect	VERB
fumecheng-7188	83	25	the	the	DET
fumecheng-7188	83	26	coordinates	coordinate	NOUN
fumecheng-7188	83	27	of	of	ADP
fumecheng-7188	83	28	measuring	measure	VERB
fumecheng-7188	83	29	points	point	NOUN
fumecheng-7188	83	30	.	.	PUNCT
fumecheng-7188	84	1	according	accord	VERB
fumecheng-7188	84	2	to	to	ADP
fumecheng-7188	84	3	the	the	DET
fumecheng-7188	84	4	definition	definition	NOUN
fumecheng-7188	84	5	of	of	ADP
fumecheng-7188	84	6	the	the	DET
fumecheng-7188	84	7	profile	profile	NOUN
fumecheng-7188	84	8	deviations	deviation	NOUN
fumecheng-7188	84	9	,	,	PUNCT
fumecheng-7188	84	10	it	it	PRON
fumecheng-7188	84	11	registers	register	VERB
fumecheng-7188	84	12	maximal	maximal	ADJ
fumecheng-7188	84	13	deviation	deviation	NOUN
fumecheng-7188	84	14	value	value	NOUN
fumecheng-7188	84	15	δmaxand	δmaxand	NOUN
fumecheng-7188	84	16	shows	show	VERB
fumecheng-7188	84	17	its	its	PRON
fumecheng-7188	84	18	position	position	NOUN
fumecheng-7188	84	19	in	in	ADP
fumecheng-7188	84	20	the	the	DET
fumecheng-7188	84	21	profile	profile	NOUN
fumecheng-7188	84	22	.	.	PUNCT
fumecheng-7188	85	1	the	the	DET
fumecheng-7188	85	2	number	number	NOUN
fumecheng-7188	85	3	of	of	ADP
fumecheng-7188	85	4	collected	collect	VERB
fumecheng-7188	85	5	points	point	NOUN
fumecheng-7188	85	6	is	be	AUX
fumecheng-7188	85	7	dependent	dependent	ADJ
fumecheng-7188	85	8	on	on	ADP
fumecheng-7188	85	9	the	the	DET
fumecheng-7188	85	10	measurement	measurement	NOUN
fumecheng-7188	85	11	step	step	NOUN
fumecheng-7188	85	12	and	and	CCONJ
fumecheng-7188	85	13	only	only	ADV
fumecheng-7188	85	14	approximately	approximately	ADV
fumecheng-7188	85	15	corresponds	correspond	VERB
fumecheng-7188	85	16	to	to	ADP
fumecheng-7188	85	17	the	the	DET
fumecheng-7188	85	18	profile	profile	NOUN
fumecheng-7188	85	19	length	length	NOUN
fumecheng-7188	85	20	divided	divide	VERB
fumecheng-7188	85	21	by	by	ADP
fumecheng-7188	85	22	step	step	NOUN
fumecheng-7188	85	23	.	.	PUNCT
fumecheng-7188	86	1	apart	apart	ADV
fumecheng-7188	86	2	from	from	ADP
fumecheng-7188	86	3	deviation	deviation	NOUN
fumecheng-7188	86	4	value	value	NOUN
fumecheng-7188	86	5	δ	δ	PROPN
fumecheng-7188	86	6	,	,	PUNCT
fumecheng-7188	86	7	scanning	scan	VERB
fumecheng-7188	86	8	time	time	NOUN
fumecheng-7188	86	9	was	be	AUX
fumecheng-7188	86	10	registered	register	VERB
fumecheng-7188	86	11	directly	directly	ADV
fumecheng-7188	86	12	by	by	ADP
fumecheng-7188	86	13	the	the	DET
fumecheng-7188	86	14	cmm	cmm	PROPN
fumecheng-7188	86	15	program	program	PROPN
fumecheng-7188	86	16	.	.	PUNCT
fumecheng-7188	87	1	after	after	SCONJ
fumecheng-7188	87	2	the	the	DET
fumecheng-7188	87	3	measurement	measurement	NOUN
fumecheng-7188	87	4	is	be	AUX
fumecheng-7188	87	5	finished	finish	VERB
fumecheng-7188	87	6	,	,	PUNCT
fumecheng-7188	87	7	the	the	DET
fumecheng-7188	87	8	program	program	NOUN
fumecheng-7188	87	9	records	record	VERB
fumecheng-7188	87	10	automatically	automatically	ADV
fumecheng-7188	87	11	the	the	DET
fumecheng-7188	87	12	measurement	measurement	NOUN
fumecheng-7188	87	13	report	report	NOUN
fumecheng-7188	87	14	with	with	ADP
fumecheng-7188	87	15	the	the	DET
fumecheng-7188	87	16	value	value	NOUN
fumecheng-7188	87	17	of	of	ADP
fumecheng-7188	87	18	the	the	DET
fumecheng-7188	87	19	largest	large	ADJ
fumecheng-7188	87	20	registered	register	VERB
fumecheng-7188	87	21	deviation	deviation	NOUN
fumecheng-7188	87	22	from	from	ADP
fumecheng-7188	87	23	the	the	DET
fumecheng-7188	87	24	reference	reference	NOUN
fumecheng-7188	87	25	profile	profile	NOUN
fumecheng-7188	87	26	.	.	PUNCT
fumecheng-7188	88	1	moreover	moreover	ADV
fumecheng-7188	88	2	,	,	PUNCT
fumecheng-7188	88	3	the	the	DET
fumecheng-7188	88	4	program	program	NOUN
fumecheng-7188	88	5	makes	make	VERB
fumecheng-7188	88	6	it	it	PRON
fumecheng-7188	88	7	possible	possible	ADJ
fumecheng-7188	88	8	to	to	PART
fumecheng-7188	88	9	register	register	VERB
fumecheng-7188	88	10	all	all	DET
fumecheng-7188	88	11	the	the	DET
fumecheng-7188	88	12	measuring	measure	VERB
fumecheng-7188	88	13	points	point	NOUN
fumecheng-7188	88	14	from	from	ADP
fumecheng-7188	88	15	the	the	DET
fumecheng-7188	88	16	scanning	scanning	NOUN
fumecheng-7188	88	17	,	,	PUNCT
fumecheng-7188	88	18	in	in	ADP
fumecheng-7188	88	19	the	the	DET
fumecheng-7188	88	20	respective	respective	ADJ
fumecheng-7188	88	21	file	file	NOUN
fumecheng-7188	88	22	*	*	NOUN
fumecheng-7188	88	23	.dxf	.dxf	NOUN
fumecheng-7188	88	24	.	.	PUNCT
fumecheng-7188	89	1	cnc	cnc	ADJ
fumecheng-7188	89	2	scanning	scanning	NOUN
fumecheng-7188	89	3	scanning	scan	VERB
fumecheng-7188	89	4	basic	basic	ADJ
fumecheng-7188	89	5	plane	plane	NOUN
fumecheng-7188	89	6	---------	---------	PUNCT
fumecheng-7188	89	7	cnc	cnc	ADJ
fumecheng-7188	89	8	parameters	parameter	NOUN
fumecheng-7188	89	9	step	step	VERB
fumecheng-7188	89	10	clearance	clearance	NOUN
fumecheng-7188	89	11	velocity	velocity	NOUN
fumecheng-7188	89	12	deflection	deflection	NOUN
fumecheng-7188	89	13	start	start	VERB
fumecheng-7188	89	14	point	point	NOUN
fumecheng-7188	89	15	---	---	PUNCT
fumecheng-7188	89	16	end	end	NOUN
fumecheng-7188	89	17	point	point	NOUN
fumecheng-7188	89	18	-	-	PUNCT
fumecheng-7188	89	19	start	start	NOUN
fumecheng-7188	89	20	direction	direction	NOUN
fumecheng-7188	89	21	end	end	NOUN
fumecheng-7188	89	22	direction	direction	NOUN
fumecheng-7188	89	23	clean	clean	ADJ
fumecheng-7188	89	24	help	help	NOUN
fumecheng-7188	89	25	ok	ok	INTJ
fumecheng-7188	89	26	126	126	NUM
fumecheng-7188	89	27	t.	t.	NOUN
fumecheng-7188	89	28	mazur	mazur	PROPN
fumecheng-7188	89	29	,	,	PUNCT
fumecheng-7188	89	30	m.	m.	PROPN
fumecheng-7188	89	31	rucki	rucki	PROPN
fumecheng-7188	89	32	,	,	PUNCT
fumecheng-7188	89	33	y.	y.	PROPN
fumecheng-7188	89	34	gutsalenko	gutsalenko	PROPN
fumecheng-7188	89	35	3	3	NUM
fumecheng-7188	89	36	.	.	PUNCT
fumecheng-7188	89	37	test	test	NOUN
fumecheng-7188	89	38	campaign	campaign	NOUN
fumecheng-7188	89	39	the	the	DET
fumecheng-7188	89	40	test	test	NOUN
fumecheng-7188	89	41	campaign	campaign	NOUN
fumecheng-7188	89	42	consisted	consist	VERB
fumecheng-7188	89	43	of	of	ADP
fumecheng-7188	89	44	three	three	NUM
fumecheng-7188	89	45	experiments	experiment	NOUN
fumecheng-7188	89	46	aimed	aim	VERB
fumecheng-7188	89	47	at	at	ADP
fumecheng-7188	89	48	determining	determine	VERB
fumecheng-7188	89	49	the	the	DET
fumecheng-7188	89	50	effect	effect	NOUN
fumecheng-7188	89	51	of	of	ADP
fumecheng-7188	89	52	scanning	scan	VERB
fumecheng-7188	89	53	velocity	velocity	NOUN
fumecheng-7188	89	54	on	on	ADP
fumecheng-7188	89	55	the	the	DET
fumecheng-7188	89	56	results	result	NOUN
fumecheng-7188	89	57	of	of	ADP
fumecheng-7188	89	58	form	form	NOUN
fumecheng-7188	89	59	deviation	deviation	NOUN
fumecheng-7188	89	60	δ	δ	PROPN
fumecheng-7188	89	61	measurement	measurement	NOUN
fumecheng-7188	89	62	,	,	PUNCT
fumecheng-7188	89	63	evaluation	evaluation	NOUN
fumecheng-7188	89	64	of	of	ADP
fumecheng-7188	89	65	deviation	deviation	NOUN
fumecheng-7188	89	66	δ	δ	PROPN
fumecheng-7188	89	67	measurement	measurement	NOUN
fumecheng-7188	89	68	uncertainty	uncertainty	NOUN
fumecheng-7188	89	69	and	and	CCONJ
fumecheng-7188	89	70	the	the	DET
fumecheng-7188	89	71	measurement	measurement	NOUN
fumecheng-7188	89	72	repeatability	repeatability	NOUN
fumecheng-7188	89	73	.	.	PUNCT
fumecheng-7188	90	1	during	during	ADP
fumecheng-7188	90	2	the	the	DET
fumecheng-7188	90	3	profile	profile	NOUN
fumecheng-7188	90	4	scanning	scanning	NOUN
fumecheng-7188	90	5	,	,	PUNCT
fumecheng-7188	90	6	three	three	NUM
fumecheng-7188	90	7	parameters	parameter	NOUN
fumecheng-7188	90	8	could	could	AUX
fumecheng-7188	90	9	be	be	AUX
fumecheng-7188	90	10	set	set	VERB
fumecheng-7188	90	11	:	:	PUNCT
fumecheng-7188	90	12	▪	▪	X
fumecheng-7188	90	13	scanning	scan	VERB
fumecheng-7188	90	14	velocity	velocity	NOUN
fumecheng-7188	90	15	vs	vs	ADP
fumecheng-7188	90	16	in	in	ADP
fumecheng-7188	90	17	the	the	DET
fumecheng-7188	90	18	range	range	NOUN
fumecheng-7188	90	19	between	between	ADP
fumecheng-7188	90	20	0.5	0.5	NUM
fumecheng-7188	90	21	and	and	CCONJ
fumecheng-7188	90	22	4	4	NUM
fumecheng-7188	90	23	mm	mm	NOUN
fumecheng-7188	90	24	/	/	SYM
fumecheng-7188	90	25	s	s	PROPN
fumecheng-7188	90	26	,	,	PUNCT
fumecheng-7188	90	27	▪	▪	X
fumecheng-7188	90	28	permissible	permissible	ADJ
fumecheng-7188	90	29	probe	probe	NOUN
fumecheng-7188	90	30	deflection	deflection	NOUN
fumecheng-7188	90	31	pd	pd	PROPN
fumecheng-7188	90	32	in	in	ADP
fumecheng-7188	90	33	the	the	DET
fumecheng-7188	90	34	range	range	NOUN
fumecheng-7188	90	35	between	between	ADP
fumecheng-7188	90	36	0.15	0.15	NUM
fumecheng-7188	90	37	and	and	CCONJ
fumecheng-7188	90	38	0.4	0.4	NUM
fumecheng-7188	90	39	mm	mm	PROPN
fumecheng-7188	90	40	,	,	PUNCT
fumecheng-7188	90	41	and	and	CCONJ
fumecheng-7188	90	42	,	,	PUNCT
fumecheng-7188	90	43	▪	▪	ADJ
fumecheng-7188	90	44	scanning	scan	VERB
fumecheng-7188	90	45	step	step	NOUN
fumecheng-7188	90	46	s	s	NOUN
fumecheng-7188	90	47	between	between	ADP
fumecheng-7188	90	48	0.05	0.05	NUM
fumecheng-7188	90	49	and	and	CCONJ
fumecheng-7188	90	50	1	1	NUM
fumecheng-7188	90	51	mm	mm	NOUN
fumecheng-7188	90	52	.	.	PUNCT
fumecheng-7188	91	1	the	the	DET
fumecheng-7188	91	2	respective	respective	ADJ
fumecheng-7188	91	3	values	value	NOUN
fumecheng-7188	91	4	used	use	VERB
fumecheng-7188	91	5	in	in	ADP
fumecheng-7188	91	6	each	each	DET
fumecheng-7188	91	7	measurement	measurement	NOUN
fumecheng-7188	91	8	series	series	NOUN
fumecheng-7188	91	9	are	be	AUX
fumecheng-7188	91	10	presented	present	VERB
fumecheng-7188	91	11	in	in	ADP
fumecheng-7188	91	12	the	the	DET
fumecheng-7188	91	13	table	table	NOUN
fumecheng-7188	91	14	1	1	NUM
fumecheng-7188	91	15	.	.	PUNCT
fumecheng-7188	91	16	table	table	NOUN
fumecheng-7188	91	17	1	1	NUM
fumecheng-7188	91	18	parameters	parameter	NOUN
fumecheng-7188	91	19	of	of	ADP
fumecheng-7188	91	20	experimental	experimental	ADJ
fumecheng-7188	91	21	measurements	measurement	NOUN
fumecheng-7188	91	22	series	series	PROPN
fumecheng-7188	91	23	no	no	INTJ
fumecheng-7188	91	24	.	.	PUNCT
fumecheng-7188	92	1	vs	vs	ADP
fumecheng-7188	92	2	[	[	X
fumecheng-7188	92	3	mm	mm	PROPN
fumecheng-7188	92	4	/	/	SYM
fumecheng-7188	92	5	s	s	PROPN
fumecheng-7188	92	6	]	]	X
fumecheng-7188	92	7	pd	pd	PROPN
fumecheng-7188	93	1	[	[	X
fumecheng-7188	93	2	mm	mm	X
fumecheng-7188	93	3	]	]	X
fumecheng-7188	93	4	s	s	X
fumecheng-7188	94	1	[	[	X
fumecheng-7188	94	2	mm	mm	X
fumecheng-7188	94	3	]	]	X
fumecheng-7188	94	4	number	number	NOUN
fumecheng-7188	94	5	of	of	ADP
fumecheng-7188	94	6	repetitions	repetition	NOUN
fumecheng-7188	94	7	n	n	NOUN
fumecheng-7188	94	8	1	1	NUM
fumecheng-7188	94	9	1	1	NUM
fumecheng-7188	94	10	0.15	0.15	NUM
fumecheng-7188	94	11	0.2	0.2	NUM
fumecheng-7188	94	12	5	5	NUM
fumecheng-7188	94	13	2	2	NUM
fumecheng-7188	94	14	1	1	NUM
fumecheng-7188	94	15	0.2	0.2	NUM
fumecheng-7188	94	16	0.2	0.2	NUM
fumecheng-7188	94	17	5	5	NUM
fumecheng-7188	94	18	3	3	NUM
fumecheng-7188	94	19	1	1	NUM
fumecheng-7188	94	20	0.3	0.3	NUM
fumecheng-7188	94	21	0.2	0.2	NUM
fumecheng-7188	94	22	5	5	NUM
fumecheng-7188	94	23	4	4	NUM
fumecheng-7188	94	24	1	1	NUM
fumecheng-7188	94	25	0.4	0.4	NUM
fumecheng-7188	94	26	0.2	0.2	NUM
fumecheng-7188	94	27	5	5	NUM
fumecheng-7188	94	28	5	5	NUM
fumecheng-7188	94	29	2	2	NUM
fumecheng-7188	94	30	0.15	0.15	NUM
fumecheng-7188	94	31	0.2	0.2	NUM
fumecheng-7188	94	32	5	5	NUM
fumecheng-7188	94	33	6	6	NUM
fumecheng-7188	94	34	2	2	NUM
fumecheng-7188	94	35	0.2	0.2	NUM
fumecheng-7188	94	36	0.2	0.2	NUM
fumecheng-7188	94	37	5	5	NUM
fumecheng-7188	94	38	7	7	NUM
fumecheng-7188	94	39	2	2	NUM
fumecheng-7188	94	40	0.3	0.3	NUM
fumecheng-7188	94	41	0.2	0.2	NUM
fumecheng-7188	94	42	5	5	NUM
fumecheng-7188	94	43	8	8	NUM
fumecheng-7188	94	44	2	2	NUM
fumecheng-7188	94	45	0.4	0.4	NUM
fumecheng-7188	94	46	0.2	0.2	NUM
fumecheng-7188	94	47	5	5	NUM
fumecheng-7188	94	48	9	9	NUM
fumecheng-7188	94	49	3	3	NUM
fumecheng-7188	94	50	0.15	0.15	NUM
fumecheng-7188	94	51	0.2	0.2	NUM
fumecheng-7188	94	52	50	50	NUM
fumecheng-7188	94	53	(	(	PUNCT
fumecheng-7188	94	54	3×5	3×5	NUM
fumecheng-7188	94	55	+	+	NOUN
fumecheng-7188	94	56	1×10	1×10	NUM
fumecheng-7188	94	57	+	+	NOUN
fumecheng-7188	94	58	1×25	1×25	NUM
fumecheng-7188	94	59	)	)	PUNCT
fumecheng-7188	94	60	10	10	NUM
fumecheng-7188	94	61	3	3	NUM
fumecheng-7188	94	62	0.2	0.2	NUM
fumecheng-7188	94	63	0.2	0.2	NUM
fumecheng-7188	94	64	5	5	NUM
fumecheng-7188	94	65	11	11	NUM
fumecheng-7188	94	66	3	3	NUM
fumecheng-7188	94	67	0.3	0.3	NUM
fumecheng-7188	94	68	0.2	0.2	NUM
fumecheng-7188	94	69	5	5	NUM
fumecheng-7188	94	70	12	12	NUM
fumecheng-7188	94	71	3	3	NUM
fumecheng-7188	94	72	0.4	0.4	NUM
fumecheng-7188	94	73	0.2	0.2	NUM
fumecheng-7188	94	74	5	5	NUM
fumecheng-7188	94	75	13	13	NUM
fumecheng-7188	94	76	4	4	NUM
fumecheng-7188	94	77	0.15	0.15	NUM
fumecheng-7188	94	78	0.2	0.2	NUM
fumecheng-7188	94	79	5	5	NUM
fumecheng-7188	94	80	14	14	NUM
fumecheng-7188	94	81	4	4	NUM
fumecheng-7188	94	82	0.2	0.2	NUM
fumecheng-7188	94	83	0.2	0.2	NUM
fumecheng-7188	94	84	5	5	NUM
fumecheng-7188	94	85	15	15	NUM
fumecheng-7188	94	86	4	4	NUM
fumecheng-7188	94	87	0.3	0.3	NUM
fumecheng-7188	94	88	0.2	0.2	NUM
fumecheng-7188	94	89	5	5	NUM
fumecheng-7188	94	90	16	16	NUM
fumecheng-7188	94	91	4	4	NUM
fumecheng-7188	94	92	0.4	0.4	NUM
fumecheng-7188	94	93	0.2	0.2	NUM
fumecheng-7188	94	94	5	5	NUM
fumecheng-7188	94	95	17	17	NUM
fumecheng-7188	94	96	3	3	NUM
fumecheng-7188	94	97	0.15	0.15	NUM
fumecheng-7188	94	98	0.2	0.2	NUM
fumecheng-7188	94	99	50	50	NUM
fumecheng-7188	94	100	18	18	NUM
fumecheng-7188	94	101	3	3	NUM
fumecheng-7188	94	102	0.15	0.15	NUM
fumecheng-7188	94	103	0.05	0.05	NUM
fumecheng-7188	94	104	50	50	NUM
fumecheng-7188	94	105	the	the	DET
fumecheng-7188	94	106	above	above	ADV
fumecheng-7188	94	107	-	-	PUNCT
fumecheng-7188	94	108	mentioned	mention	VERB
fumecheng-7188	94	109	parameters	parameter	NOUN
fumecheng-7188	94	110	were	be	AUX
fumecheng-7188	94	111	chosen	choose	VERB
fumecheng-7188	94	112	in	in	ADP
fumecheng-7188	94	113	order	order	NOUN
fumecheng-7188	94	114	to	to	PART
fumecheng-7188	94	115	perform	perform	VERB
fumecheng-7188	94	116	three	three	NUM
fumecheng-7188	94	117	different	different	ADJ
fumecheng-7188	94	118	experiments	experiment	NOUN
fumecheng-7188	94	119	,	,	PUNCT
fumecheng-7188	94	120	as	as	SCONJ
fumecheng-7188	94	121	explained	explain	VERB
fumecheng-7188	94	122	below	below	ADV
fumecheng-7188	94	123	.	.	PUNCT
fumecheng-7188	95	1	3.1	3.1	NUM
fumecheng-7188	95	2	.	.	PUNCT
fumecheng-7188	95	3	effect	effect	NOUN
fumecheng-7188	95	4	of	of	ADP
fumecheng-7188	95	5	scanning	scan	VERB
fumecheng-7188	95	6	velocity	velocity	NOUN
fumecheng-7188	95	7	on	on	ADP
fumecheng-7188	95	8	results	result	NOUN
fumecheng-7188	95	9	of	of	ADP
fumecheng-7188	95	10	the	the	DET
fumecheng-7188	95	11	form	form	NOUN
fumecheng-7188	95	12	deviation	deviation	NOUN
fumecheng-7188	95	13	measurements	measurement	NOUN
fumecheng-7188	95	14	in	in	ADP
fumecheng-7188	95	15	the	the	DET
fumecheng-7188	95	16	first	first	ADJ
fumecheng-7188	95	17	set	set	NOUN
fumecheng-7188	95	18	of	of	ADP
fumecheng-7188	95	19	experiments	experiment	NOUN
fumecheng-7188	95	20	,	,	PUNCT
fumecheng-7188	95	21	the	the	DET
fumecheng-7188	95	22	goal	goal	NOUN
fumecheng-7188	95	23	was	be	AUX
fumecheng-7188	95	24	to	to	PART
fumecheng-7188	95	25	determine	determine	VERB
fumecheng-7188	95	26	the	the	DET
fumecheng-7188	95	27	effect	effect	NOUN
fumecheng-7188	95	28	of	of	ADP
fumecheng-7188	95	29	different	different	ADJ
fumecheng-7188	95	30	scanning	scanning	NOUN
fumecheng-7188	95	31	velocities	velocity	NOUN
fumecheng-7188	95	32	vs	vs	ADP
fumecheng-7188	95	33	on	on	ADP
fumecheng-7188	95	34	the	the	DET
fumecheng-7188	95	35	results	result	NOUN
fumecheng-7188	95	36	of	of	ADP
fumecheng-7188	95	37	profile	profile	NOUN
fumecheng-7188	95	38	form	form	NOUN
fumecheng-7188	95	39	deviation	deviation	NOUN
fumecheng-7188	95	40	,	,	PUNCT
fumecheng-7188	95	41	considering	consider	VERB
fumecheng-7188	95	42	the	the	DET
fumecheng-7188	95	43	measurement	measurement	NOUN
fumecheng-7188	95	44	time	time	NOUN
fumecheng-7188	95	45	.	.	PUNCT
fumecheng-7188	96	1	in	in	ADP
fumecheng-7188	96	2	this	this	DET
fumecheng-7188	96	3	set	set	NOUN
fumecheng-7188	96	4	of	of	ADP
fumecheng-7188	96	5	measurements	measurement	NOUN
fumecheng-7188	96	6	,	,	PUNCT
fumecheng-7188	96	7	the	the	DET
fumecheng-7188	96	8	scanning	scanning	NOUN
fumecheng-7188	96	9	step	step	NOUN
fumecheng-7188	96	10	remained	remain	VERB
fumecheng-7188	96	11	unchanged	unchanged	ADJ
fumecheng-7188	96	12	,	,	PUNCT
fumecheng-7188	96	13	s	s	PART
fumecheng-7188	96	14	=	=	NOUN
fumecheng-7188	96	15	0.2	0.2	NUM
fumecheng-7188	96	16	mm	mm	NOUN
fumecheng-7188	96	17	.	.	PUNCT
fumecheng-7188	97	1	as	as	SCONJ
fumecheng-7188	97	2	shown	show	VERB
fumecheng-7188	97	3	in	in	ADP
fumecheng-7188	97	4	the	the	DET
fumecheng-7188	97	5	table	table	NOUN
fumecheng-7188	97	6	1	1	NUM
fumecheng-7188	97	7	above	above	ADV
fumecheng-7188	97	8	,	,	PUNCT
fumecheng-7188	97	9	the	the	DET
fumecheng-7188	97	10	measurements	measurement	NOUN
fumecheng-7188	97	11	were	be	AUX
fumecheng-7188	97	12	performed	perform	VERB
fumecheng-7188	97	13	for	for	ADP
fumecheng-7188	97	14	16	16	NUM
fumecheng-7188	97	15	combinations	combination	NOUN
fumecheng-7188	97	16	of	of	ADP
fumecheng-7188	97	17	vs	vs	ADP
fumecheng-7188	97	18	and	and	CCONJ
fumecheng-7188	97	19	pd	pd	PROPN
fumecheng-7188	97	20	settings	setting	NOUN
fumecheng-7188	97	21	.	.	PUNCT
fumecheng-7188	98	1	for	for	ADP
fumecheng-7188	98	2	each	each	DET
fumecheng-7188	98	3	combination	combination	NOUN
fumecheng-7188	98	4	,	,	PUNCT
fumecheng-7188	98	5	the	the	DET
fumecheng-7188	98	6	measurements	measurement	NOUN
fumecheng-7188	98	7	were	be	AUX
fumecheng-7188	98	8	repeated	repeat	VERB
fumecheng-7188	98	9	5	5	NUM
fumecheng-7188	98	10	times	time	NOUN
fumecheng-7188	98	11	.	.	PUNCT
fumecheng-7188	99	1	the	the	DET
fumecheng-7188	99	2	number	number	NOUN
fumecheng-7188	99	3	of	of	ADP
fumecheng-7188	99	4	measuring	measure	VERB
fumecheng-7188	99	5	points	point	NOUN
fumecheng-7188	99	6	differed	differ	VERB
fumecheng-7188	99	7	in	in	ADP
fumecheng-7188	99	8	a	a	DET
fumecheng-7188	99	9	small	small	ADJ
fumecheng-7188	99	10	range	range	NOUN
fumecheng-7188	99	11	from	from	ADP
fumecheng-7188	99	12	645	645	NUM
fumecheng-7188	99	13	up	up	ADP
fumecheng-7188	99	14	to	to	ADP
fumecheng-7188	99	15	660	660	NUM
fumecheng-7188	99	16	.	.	NOUN
fumecheng-7188	99	17	3.2	3.2	NUM
fumecheng-7188	99	18	.	.	PUNCT
fumecheng-7188	100	1	uncertainty	uncertainty	NOUN
fumecheng-7188	100	2	evaluation	evaluation	NOUN
fumecheng-7188	100	3	it	it	PRON
fumecheng-7188	100	4	can	can	AUX
fumecheng-7188	100	5	be	be	AUX
fumecheng-7188	100	6	assumed	assume	VERB
fumecheng-7188	100	7	that	that	SCONJ
fumecheng-7188	100	8	the	the	DET
fumecheng-7188	100	9	factors	factor	NOUN
fumecheng-7188	100	10	having	have	VERB
fumecheng-7188	100	11	effect	effect	NOUN
fumecheng-7188	100	12	on	on	ADP
fumecheng-7188	100	13	the	the	DET
fumecheng-7188	100	14	measurement	measurement	NOUN
fumecheng-7188	100	15	uncertainty	uncertainty	NOUN
fumecheng-7188	100	16	of	of	ADP
fumecheng-7188	100	17	a	a	DET
fumecheng-7188	100	18	cam	cam	NOUN
fumecheng-7188	100	19	contour	contour	NOUN
fumecheng-7188	100	20	are	be	AUX
fumecheng-7188	100	21	similar	similar	ADJ
fumecheng-7188	100	22	to	to	ADP
fumecheng-7188	100	23	the	the	DET
fumecheng-7188	100	24	ones	one	NOUN
fumecheng-7188	100	25	typical	typical	ADJ
fumecheng-7188	100	26	for	for	ADP
fumecheng-7188	100	27	roundness	roundness	NOUN
fumecheng-7188	100	28	measurement	measurement	NOUN
fumecheng-7188	101	1	[	[	X
fumecheng-7188	101	2	28	28	NUM
fumecheng-7188	101	3	-	-	SYM
fumecheng-7188	101	4	29	29	NUM
fumecheng-7188	101	5	]	]	PUNCT
fumecheng-7188	101	6	.	.	PUNCT
fumecheng-7188	102	1	uncertainty	uncertainty	NOUN
fumecheng-7188	102	2	analysis	analysis	NOUN
fumecheng-7188	102	3	was	be	AUX
fumecheng-7188	102	4	performed	perform	VERB
fumecheng-7188	102	5	using	use	VERB
fumecheng-7188	102	6	the	the	DET
fumecheng-7188	102	7	type	type	NOUN
fumecheng-7188	102	8	a	a	DET
fumecheng-7188	102	9	approach	approach	NOUN
fumecheng-7188	102	10	[	[	X
fumecheng-7188	102	11	30	30	NUM
fumecheng-7188	102	12	]	]	PUNCT
fumecheng-7188	102	13	with	with	ADP
fumecheng-7188	102	14	50	50	NUM
fumecheng-7188	102	15	repetitions	repetition	NOUN
fumecheng-7188	102	16	made	make	VERB
fumecheng-7188	102	17	in	in	ADP
fumecheng-7188	102	18	the	the	DET
fumecheng-7188	102	19	accuracy	accuracy	NOUN
fumecheng-7188	102	20	analysis	analysis	NOUN
fumecheng-7188	102	21	of	of	ADP
fumecheng-7188	102	22	the	the	DET
fumecheng-7188	102	23	curved	curved	ADJ
fumecheng-7188	102	24	profile	profile	PROPN
fumecheng-7188	102	25	measurement	measurement	NOUN
fumecheng-7188	102	26	with	with	ADP
fumecheng-7188	102	27	cmm	cmm	NOUN
fumecheng-7188	102	28	:	:	PUNCT
fumecheng-7188	102	29	a	a	DET
fumecheng-7188	102	30	case	case	NOUN
fumecheng-7188	102	31	study	study	VERB
fumecheng-7188	102	32	127	127	NUM
fumecheng-7188	102	33	repeatability	repeatability	NOUN
fumecheng-7188	102	34	conditions	condition	NOUN
fumecheng-7188	102	35	.	.	PUNCT
fumecheng-7188	103	1	two	two	NUM
fumecheng-7188	103	2	series	series	NOUN
fumecheng-7188	103	3	of	of	ADP
fumecheng-7188	103	4	measurements	measurement	NOUN
fumecheng-7188	103	5	marked	mark	VERB
fumecheng-7188	103	6	17	17	NUM
fumecheng-7188	103	7	and	and	CCONJ
fumecheng-7188	103	8	18	18	NUM
fumecheng-7188	103	9	in	in	ADP
fumecheng-7188	103	10	table	table	NOUN
fumecheng-7188	103	11	1	1	NUM
fumecheng-7188	103	12	had	have	VERB
fumecheng-7188	103	13	similar	similar	ADJ
fumecheng-7188	103	14	parameters	parameter	NOUN
fumecheng-7188	103	15	vs	vs	ADP
fumecheng-7188	103	16	=	=	SYM
fumecheng-7188	103	17	3	3	NUM
fumecheng-7188	103	18	mm	mm	PROPN
fumecheng-7188	103	19	/	/	SYM
fumecheng-7188	103	20	s	s	PROPN
fumecheng-7188	103	21	and	and	CCONJ
fumecheng-7188	103	22	pd	pd	X
fumecheng-7188	104	1	=	=	NOUN
fumecheng-7188	104	2	0.15	0.15	NUM
fumecheng-7188	104	3	mm	mm	NOUN
fumecheng-7188	104	4	,	,	PUNCT
fumecheng-7188	104	5	but	but	CCONJ
fumecheng-7188	104	6	different	different	ADJ
fumecheng-7188	104	7	sampling	sampling	NOUN
fumecheng-7188	104	8	step	step	NOUN
fumecheng-7188	104	9	.	.	PUNCT
fumecheng-7188	105	1	this	this	DET
fumecheng-7188	105	2	experiment	experiment	NOUN
fumecheng-7188	105	3	was	be	AUX
fumecheng-7188	105	4	to	to	PART
fumecheng-7188	105	5	demonstrate	demonstrate	VERB
fumecheng-7188	105	6	how	how	SCONJ
fumecheng-7188	105	7	the	the	DET
fumecheng-7188	105	8	uncertainty	uncertainty	NOUN
fumecheng-7188	105	9	of	of	ADP
fumecheng-7188	105	10	form	form	NOUN
fumecheng-7188	105	11	deviation	deviation	NOUN
fumecheng-7188	105	12	is	be	AUX
fumecheng-7188	105	13	dependent	dependent	ADJ
fumecheng-7188	105	14	on	on	ADP
fumecheng-7188	105	15	the	the	DET
fumecheng-7188	105	16	number	number	NOUN
fumecheng-7188	105	17	of	of	ADP
fumecheng-7188	105	18	probing	probe	VERB
fumecheng-7188	105	19	points	point	NOUN
fumecheng-7188	105	20	.	.	PUNCT
fumecheng-7188	106	1	in	in	ADP
fumecheng-7188	106	2	the	the	DET
fumecheng-7188	106	3	series	series	NOUN
fumecheng-7188	106	4	17	17	NUM
fumecheng-7188	106	5	,	,	PUNCT
fumecheng-7188	106	6	at	at	ADP
fumecheng-7188	106	7	sampling	sample	VERB
fumecheng-7188	106	8	step	step	NOUN
fumecheng-7188	106	9	s	s	PART
fumecheng-7188	106	10	=	=	NOUN
fumecheng-7188	106	11	0.2	0.2	NUM
fumecheng-7188	106	12	mm	mm	NOUN
fumecheng-7188	106	13	,	,	PUNCT
fumecheng-7188	106	14	the	the	DET
fumecheng-7188	106	15	number	number	NOUN
fumecheng-7188	106	16	of	of	ADP
fumecheng-7188	106	17	probing	probe	VERB
fumecheng-7188	106	18	points	point	NOUN
fumecheng-7188	106	19	was	be	AUX
fumecheng-7188	106	20	ca	ca	NOUN
fumecheng-7188	106	21	.	.	PUNCT
fumecheng-7188	107	1	650	650	NUM
fumecheng-7188	107	2	,	,	PUNCT
fumecheng-7188	107	3	while	while	SCONJ
fumecheng-7188	107	4	in	in	ADP
fumecheng-7188	107	5	the	the	DET
fumecheng-7188	107	6	series	series	NOUN
fumecheng-7188	107	7	18	18	NUM
fumecheng-7188	107	8	it	it	PRON
fumecheng-7188	107	9	was	be	AUX
fumecheng-7188	107	10	2560	2560	NUM
fumecheng-7188	107	11	-	-	SYM
fumecheng-7188	107	12	2590	2590	NUM
fumecheng-7188	107	13	,	,	PUNCT
fumecheng-7188	107	14	close	close	ADJ
fumecheng-7188	107	15	to	to	ADP
fumecheng-7188	107	16	the	the	DET
fumecheng-7188	107	17	respective	respective	ADJ
fumecheng-7188	107	18	number	number	NOUN
fumecheng-7188	107	19	in	in	ADP
fumecheng-7188	107	20	the	the	DET
fumecheng-7188	107	21	reference	reference	NOUN
fumecheng-7188	107	22	file	file	NOUN
fumecheng-7188	107	23	*	*	NOUN
fumecheng-7188	107	24	.dxf	.dxf	NOUN
fumecheng-7188	107	25	.	.	PUNCT
fumecheng-7188	108	1	3.3	3.3	NUM
fumecheng-7188	108	2	.	.	PUNCT
fumecheng-7188	108	3	repeatability	repeatability	NOUN
fumecheng-7188	108	4	in	in	ADP
fumecheng-7188	108	5	short	short	ADJ
fumecheng-7188	108	6	measurement	measurement	NOUN
fumecheng-7188	108	7	series	series	NOUN
fumecheng-7188	108	8	considering	consider	VERB
fumecheng-7188	108	9	a	a	DET
fumecheng-7188	108	10	relatively	relatively	ADV
fumecheng-7188	108	11	long	long	ADJ
fumecheng-7188	108	12	time	time	NOUN
fumecheng-7188	108	13	of	of	ADP
fumecheng-7188	108	14	a	a	DET
fumecheng-7188	108	15	single	single	ADJ
fumecheng-7188	108	16	measurement	measurement	NOUN
fumecheng-7188	108	17	,	,	PUNCT
fumecheng-7188	108	18	which	which	PRON
fumecheng-7188	108	19	can	can	AUX
fumecheng-7188	108	20	be	be	AUX
fumecheng-7188	108	21	as	as	ADV
fumecheng-7188	108	22	long	long	ADJ
fumecheng-7188	108	23	as	as	ADP
fumecheng-7188	108	24	200	200	NUM
fumecheng-7188	108	25	s	s	NOUN
fumecheng-7188	108	26	at	at	ADP
fumecheng-7188	108	27	scanning	scan	VERB
fumecheng-7188	108	28	speed	speed	NOUN
fumecheng-7188	108	29	vs	vs	ADP
fumecheng-7188	108	30	=	=	SYM
fumecheng-7188	108	31	1	1	NUM
fumecheng-7188	108	32	mm	mm	PROPN
fumecheng-7188	108	33	/	/	SYM
fumecheng-7188	108	34	s	s	PROPN
fumecheng-7188	108	35	,	,	PUNCT
fumecheng-7188	108	36	it	it	PRON
fumecheng-7188	108	37	is	be	AUX
fumecheng-7188	108	38	reasonable	reasonable	ADJ
fumecheng-7188	108	39	to	to	PART
fumecheng-7188	108	40	expect	expect	VERB
fumecheng-7188	108	41	that	that	SCONJ
fumecheng-7188	108	42	50	50	NUM
fumecheng-7188	108	43	repetitions	repetition	NOUN
fumecheng-7188	108	44	may	may	AUX
fumecheng-7188	108	45	not	not	PART
fumecheng-7188	108	46	completely	completely	ADV
fumecheng-7188	108	47	conform	conform	VERB
fumecheng-7188	108	48	to	to	ADP
fumecheng-7188	108	49	the	the	DET
fumecheng-7188	108	50	repeatability	repeatability	NOUN
fumecheng-7188	108	51	conditions	condition	NOUN
fumecheng-7188	108	52	requirement	requirement	NOUN
fumecheng-7188	108	53	.	.	PUNCT
fumecheng-7188	109	1	to	to	PART
fumecheng-7188	109	2	challenge	challenge	VERB
fumecheng-7188	109	3	this	this	DET
fumecheng-7188	109	4	issue	issue	NOUN
fumecheng-7188	109	5	,	,	PUNCT
fumecheng-7188	109	6	the	the	DET
fumecheng-7188	109	7	third	third	ADJ
fumecheng-7188	109	8	experiment	experiment	NOUN
fumecheng-7188	109	9	was	be	AUX
fumecheng-7188	109	10	performed	perform	VERB
fumecheng-7188	109	11	.	.	PUNCT
fumecheng-7188	110	1	in	in	ADP
fumecheng-7188	110	2	the	the	DET
fumecheng-7188	110	3	case	case	NOUN
fumecheng-7188	110	4	of	of	ADP
fumecheng-7188	110	5	the	the	DET
fumecheng-7188	110	6	series	series	NOUN
fumecheng-7188	110	7	9	9	NUM
fumecheng-7188	110	8	(	(	PUNCT
fumecheng-7188	110	9	table	table	NOUN
fumecheng-7188	110	10	1	1	NUM
fumecheng-7188	110	11	,	,	PUNCT
fumecheng-7188	110	12	vs	vs	ADP
fumecheng-7188	110	13	=	=	SYM
fumecheng-7188	110	14	3	3	NUM
fumecheng-7188	110	15	mm	mm	PROPN
fumecheng-7188	110	16	/	/	SYM
fumecheng-7188	110	17	s	s	PROPN
fumecheng-7188	110	18	,	,	PUNCT
fumecheng-7188	110	19	pd	pd	X
fumecheng-7188	110	20	=	=	PUNCT
fumecheng-7188	110	21	0.15	0.15	NUM
fumecheng-7188	110	22	mm	mm	NOUN
fumecheng-7188	110	23	,	,	PUNCT
fumecheng-7188	110	24	s	s	PART
fumecheng-7188	110	25	=	=	NOUN
fumecheng-7188	110	26	0.2	0.2	NUM
fumecheng-7188	110	27	mm	mm	NOUN
fumecheng-7188	110	28	)	)	PUNCT
fumecheng-7188	110	29	,	,	PUNCT
fumecheng-7188	110	30	the	the	DET
fumecheng-7188	110	31	measurement	measurement	NOUN
fumecheng-7188	110	32	was	be	AUX
fumecheng-7188	110	33	firstly	firstly	ADV
fumecheng-7188	110	34	performed	perform	VERB
fumecheng-7188	110	35	three	three	NUM
fumecheng-7188	110	36	times	time	NOUN
fumecheng-7188	110	37	with	with	ADP
fumecheng-7188	110	38	5	5	NUM
fumecheng-7188	110	39	repetitions	repetition	NOUN
fumecheng-7188	110	40	each	each	DET
fumecheng-7188	110	41	time	time	NOUN
fumecheng-7188	110	42	,	,	PUNCT
fumecheng-7188	110	43	then	then	ADV
fumecheng-7188	110	44	with	with	ADP
fumecheng-7188	110	45	10	10	NUM
fumecheng-7188	110	46	repetitions	repetition	NOUN
fumecheng-7188	110	47	,	,	PUNCT
fumecheng-7188	110	48	and	and	CCONJ
fumecheng-7188	110	49	finally	finally	ADV
fumecheng-7188	110	50	with	with	ADP
fumecheng-7188	110	51	25	25	NUM
fumecheng-7188	110	52	repetitions	repetition	NOUN
fumecheng-7188	110	53	.	.	PUNCT
fumecheng-7188	111	1	this	this	DET
fumecheng-7188	111	2	procedure	procedure	NOUN
fumecheng-7188	111	3	was	be	AUX
fumecheng-7188	111	4	described	describe	VERB
fumecheng-7188	111	5	in	in	ADP
fumecheng-7188	111	6	tab	tab	PROPN
fumecheng-7188	111	7	.	.	PROPN
fumecheng-7188	112	1	1	1	NUM
fumecheng-7188	112	2	as	as	ADP
fumecheng-7188	112	3	3×5	3×5	NUM
fumecheng-7188	112	4	+	+	NOUN
fumecheng-7188	112	5	1×10	1×10	NUM
fumecheng-7188	112	6	+	+	NOUN
fumecheng-7188	112	7	1×25	1×25	NUM
fumecheng-7188	112	8	.	.	PUNCT
fumecheng-7188	113	1	thus	thus	ADV
fumecheng-7188	113	2	,	,	PUNCT
fumecheng-7188	113	3	the	the	DET
fumecheng-7188	113	4	strict	strict	ADJ
fumecheng-7188	113	5	repeatability	repeatability	NOUN
fumecheng-7188	113	6	conditions	condition	NOUN
fumecheng-7188	113	7	were	be	AUX
fumecheng-7188	113	8	kept	keep	VERB
fumecheng-7188	113	9	only	only	ADV
fumecheng-7188	113	10	for	for	ADP
fumecheng-7188	113	11	each	each	DET
fumecheng-7188	113	12	group	group	NOUN
fumecheng-7188	113	13	of	of	ADP
fumecheng-7188	113	14	repetitions	repetition	NOUN
fumecheng-7188	113	15	,	,	PUNCT
fumecheng-7188	113	16	but	but	CCONJ
fumecheng-7188	113	17	not	not	PART
fumecheng-7188	113	18	only	only	ADV
fumecheng-7188	113	19	for	for	ADP
fumecheng-7188	113	20	the	the	DET
fumecheng-7188	113	21	entire	entire	ADJ
fumecheng-7188	113	22	sample	sample	NOUN
fumecheng-7188	113	23	of	of	ADP
fumecheng-7188	113	24	50	50	NUM
fumecheng-7188	113	25	similar	similar	ADJ
fumecheng-7188	113	26	measurements	measurement	NOUN
fumecheng-7188	113	27	.	.	PUNCT
fumecheng-7188	114	1	as	as	ADP
fumecheng-7188	114	2	a	a	DET
fumecheng-7188	114	3	result	result	NOUN
fumecheng-7188	114	4	,	,	PUNCT
fumecheng-7188	114	5	measurement	measurement	NOUN
fumecheng-7188	114	6	repeatability	repeatability	NOUN
fumecheng-7188	114	7	for	for	ADP
fumecheng-7188	114	8	a	a	DET
fumecheng-7188	114	9	smaller	small	ADJ
fumecheng-7188	114	10	number	number	NOUN
fumecheng-7188	114	11	of	of	ADP
fumecheng-7188	114	12	repetitions	repetition	NOUN
fumecheng-7188	114	13	could	could	AUX
fumecheng-7188	114	14	be	be	AUX
fumecheng-7188	114	15	compared	compare	VERB
fumecheng-7188	114	16	with	with	ADP
fumecheng-7188	114	17	the	the	DET
fumecheng-7188	114	18	results	result	NOUN
fumecheng-7188	114	19	for	for	ADP
fumecheng-7188	114	20	a	a	DET
fumecheng-7188	114	21	larger	large	ADJ
fumecheng-7188	114	22	number	number	NOUN
fumecheng-7188	114	23	.	.	PUNCT
fumecheng-7188	115	1	all	all	DET
fumecheng-7188	115	2	these	these	DET
fumecheng-7188	115	3	measurements	measurement	NOUN
fumecheng-7188	115	4	,	,	PUNCT
fumecheng-7188	115	5	as	as	ADV
fumecheng-7188	115	6	well	well	ADV
fumecheng-7188	115	7	as	as	ADP
fumecheng-7188	115	8	the	the	DET
fumecheng-7188	115	9	ones	one	NOUN
fumecheng-7188	115	10	described	describe	VERB
fumecheng-7188	115	11	in	in	ADP
fumecheng-7188	115	12	section	section	NOUN
fumecheng-7188	115	13	3.1	3.1	NUM
fumecheng-7188	115	14	,	,	PUNCT
fumecheng-7188	115	15	were	be	AUX
fumecheng-7188	115	16	performed	perform	VERB
fumecheng-7188	115	17	on	on	ADP
fumecheng-7188	115	18	the	the	DET
fumecheng-7188	115	19	same	same	ADJ
fumecheng-7188	115	20	day	day	NOUN
fumecheng-7188	115	21	,	,	PUNCT
fumecheng-7188	115	22	with	with	ADP
fumecheng-7188	115	23	no	no	DET
fumecheng-7188	115	24	resetting	reset	VERB
fumecheng-7188	115	25	the	the	DET
fumecheng-7188	115	26	cmm	cmm	NOUN
fumecheng-7188	115	27	.	.	PUNCT
fumecheng-7188	116	1	after	after	ADP
fumecheng-7188	116	2	calibration	calibration	NOUN
fumecheng-7188	116	3	of	of	ADP
fumecheng-7188	116	4	the	the	DET
fumecheng-7188	116	5	probe	probe	NOUN
fumecheng-7188	116	6	,	,	PUNCT
fumecheng-7188	116	7	the	the	DET
fumecheng-7188	116	8	measured	measured	ADJ
fumecheng-7188	116	9	cam	cam	NOUN
fumecheng-7188	116	10	was	be	AUX
fumecheng-7188	116	11	not	not	PART
fumecheng-7188	116	12	moved	move	VERB
fumecheng-7188	116	13	from	from	ADP
fumecheng-7188	116	14	its	its	PRON
fumecheng-7188	116	15	fixed	fix	VERB
fumecheng-7188	116	16	position	position	NOUN
fumecheng-7188	116	17	.	.	PUNCT
fumecheng-7188	117	1	the	the	DET
fumecheng-7188	117	2	coordinate	coordinate	NOUN
fumecheng-7188	117	3	system	system	NOUN
fumecheng-7188	117	4	once	once	ADV
fumecheng-7188	117	5	established	establish	VERB
fumecheng-7188	117	6	was	be	AUX
fumecheng-7188	117	7	applied	apply	VERB
fumecheng-7188	117	8	to	to	ADP
fumecheng-7188	117	9	each	each	DET
fumecheng-7188	117	10	measurement	measurement	NOUN
fumecheng-7188	117	11	due	due	ADP
fumecheng-7188	117	12	to	to	ADP
fumecheng-7188	117	13	the	the	DET
fumecheng-7188	117	14	specially	specially	ADV
fumecheng-7188	117	15	prepared	prepared	ADJ
fumecheng-7188	117	16	software	software	NOUN
fumecheng-7188	117	17	program	program	NOUN
fumecheng-7188	117	18	.	.	PUNCT
fumecheng-7188	118	1	moreover	moreover	ADV
fumecheng-7188	118	2	,	,	PUNCT
fumecheng-7188	118	3	to	to	PART
fumecheng-7188	118	4	assure	assure	VERB
fumecheng-7188	118	5	a	a	DET
fumecheng-7188	118	6	higher	high	ADJ
fumecheng-7188	118	7	level	level	NOUN
fumecheng-7188	118	8	of	of	ADP
fumecheng-7188	118	9	repeatability	repeatability	NOUN
fumecheng-7188	118	10	,	,	PUNCT
fumecheng-7188	118	11	the	the	DET
fumecheng-7188	118	12	initial	initial	ADJ
fumecheng-7188	118	13	position	position	NOUN
fumecheng-7188	118	14	of	of	ADP
fumecheng-7188	118	15	the	the	DET
fumecheng-7188	118	16	probe	probe	NOUN
fumecheng-7188	118	17	before	before	SCONJ
fumecheng-7188	118	18	each	each	DET
fumecheng-7188	118	19	measurement	measurement	NOUN
fumecheng-7188	118	20	was	be	AUX
fumecheng-7188	118	21	identical	identical	ADJ
fumecheng-7188	118	22	.	.	PUNCT
fumecheng-7188	119	1	the	the	DET
fumecheng-7188	119	2	experiments	experiment	NOUN
fumecheng-7188	119	3	described	describe	VERB
fumecheng-7188	119	4	in	in	ADP
fumecheng-7188	119	5	section	section	NOUN
fumecheng-7188	119	6	3.2	3.2	NUM
fumecheng-7188	119	7	,	,	PUNCT
fumecheng-7188	119	8	however	however	ADV
fumecheng-7188	119	9	,	,	PUNCT
fumecheng-7188	119	10	were	be	AUX
fumecheng-7188	119	11	performed	perform	VERB
fumecheng-7188	119	12	several	several	ADJ
fumecheng-7188	119	13	months	month	NOUN
fumecheng-7188	119	14	later	later	ADV
fumecheng-7188	119	15	,	,	PUNCT
fumecheng-7188	119	16	and	and	CCONJ
fumecheng-7188	119	17	for	for	ADP
fumecheng-7188	119	18	each	each	PRON
fumecheng-7188	119	19	of	of	ADP
fumecheng-7188	119	20	them	they	PRON
fumecheng-7188	119	21	the	the	DET
fumecheng-7188	119	22	cmm	cmm	PROPN
fumecheng-7188	119	23	was	be	AUX
fumecheng-7188	119	24	started	start	VERB
fumecheng-7188	119	25	anew	anew	ADV
fumecheng-7188	119	26	.	.	PUNCT
fumecheng-7188	120	1	in	in	ADP
fumecheng-7188	120	2	this	this	DET
fumecheng-7188	120	3	way	way	NOUN
fumecheng-7188	120	4	the	the	PRON
fumecheng-7188	120	5	obtained	obtain	VERB
fumecheng-7188	120	6	results	result	NOUN
fumecheng-7188	120	7	in	in	ADP
fumecheng-7188	120	8	series	series	NOUN
fumecheng-7188	120	9	17	17	NUM
fumecheng-7188	120	10	and	and	CCONJ
fumecheng-7188	120	11	18	18	NUM
fumecheng-7188	120	12	must	must	AUX
fumecheng-7188	120	13	be	be	AUX
fumecheng-7188	120	14	treated	treat	VERB
fumecheng-7188	120	15	as	as	ADP
fumecheng-7188	120	16	two	two	NUM
fumecheng-7188	120	17	separate	separate	ADJ
fumecheng-7188	120	18	experiments	experiment	NOUN
fumecheng-7188	120	19	,	,	PUNCT
fumecheng-7188	120	20	while	while	SCONJ
fumecheng-7188	120	21	the	the	DET
fumecheng-7188	120	22	others	other	NOUN
fumecheng-7188	120	23	are	be	AUX
fumecheng-7188	120	24	somewhat	somewhat	ADV
fumecheng-7188	120	25	interconnected	interconnected	ADJ
fumecheng-7188	120	26	between	between	ADP
fumecheng-7188	120	27	each	each	DET
fumecheng-7188	120	28	other	other	ADJ
fumecheng-7188	120	29	through	through	ADP
fumecheng-7188	120	30	the	the	DET
fumecheng-7188	120	31	same	same	ADJ
fumecheng-7188	120	32	definition	definition	NOUN
fumecheng-7188	120	33	of	of	ADP
fumecheng-7188	120	34	the	the	DET
fumecheng-7188	120	35	coordinate	coordinate	NOUN
fumecheng-7188	120	36	system	system	NOUN
fumecheng-7188	120	37	and	and	CCONJ
fumecheng-7188	120	38	a	a	DET
fumecheng-7188	120	39	relatively	relatively	ADV
fumecheng-7188	120	40	short	short	ADJ
fumecheng-7188	120	41	time	time	NOUN
fumecheng-7188	120	42	between	between	ADP
fumecheng-7188	120	43	the	the	DET
fumecheng-7188	120	44	repetitions	repetition	NOUN
fumecheng-7188	120	45	.	.	PUNCT
fumecheng-7188	121	1	4	4	X
fumecheng-7188	121	2	.	.	NOUN
fumecheng-7188	121	3	results	result	NOUN
fumecheng-7188	121	4	and	and	CCONJ
fumecheng-7188	121	5	discussion	discussion	NOUN
fumecheng-7188	121	6	overall	overall	ADJ
fumecheng-7188	121	7	number	number	NOUN
fumecheng-7188	121	8	of	of	ADP
fumecheng-7188	121	9	the	the	DET
fumecheng-7188	121	10	maximal	maximal	ADJ
fumecheng-7188	121	11	deviation	deviation	NOUN
fumecheng-7188	121	12	measurement	measurement	NOUN
fumecheng-7188	121	13	results	result	NOUN
fumecheng-7188	121	14	was	be	AUX
fumecheng-7188	121	15	225	225	NUM
fumecheng-7188	121	16	.	.	PUNCT
fumecheng-7188	122	1	in	in	ADP
fumecheng-7188	122	2	order	order	NOUN
fumecheng-7188	122	3	to	to	PART
fumecheng-7188	122	4	determine	determine	VERB
fumecheng-7188	122	5	normality	normality	NOUN
fumecheng-7188	122	6	of	of	ADP
fumecheng-7188	122	7	the	the	DET
fumecheng-7188	122	8	results	result	NOUN
fumecheng-7188	122	9	distribution	distribution	NOUN
fumecheng-7188	122	10	,	,	PUNCT
fumecheng-7188	122	11	the	the	DET
fumecheng-7188	122	12	kolmogorov	kolmogorov	ADJ
fumecheng-7188	122	13	-	-	PUNCT
fumecheng-7188	122	14	smirnov	smirnov	ADJ
fumecheng-7188	122	15	test	test	NOUN
fumecheng-7188	122	16	was	be	AUX
fumecheng-7188	122	17	applied	apply	VERB
fumecheng-7188	122	18	to	to	ADP
fumecheng-7188	122	19	each	each	PRON
fumecheng-7188	122	20	of	of	ADP
fumecheng-7188	122	21	tests	test	NOUN
fumecheng-7188	122	22	with	with	ADP
fumecheng-7188	122	23	50	50	NUM
fumecheng-7188	122	24	repetitions	repetition	NOUN
fumecheng-7188	122	25	,	,	PUNCT
fumecheng-7188	122	26	namely	namely	ADV
fumecheng-7188	122	27	,	,	PUNCT
fumecheng-7188	122	28	series	series	NOUN
fumecheng-7188	122	29	no	no	NOUN
fumecheng-7188	122	30	.	.	PROPN
fumecheng-7188	122	31	9	9	NUM
fumecheng-7188	122	32	,	,	PUNCT
fumecheng-7188	122	33	17	17	NUM
fumecheng-7188	122	34	and	and	CCONJ
fumecheng-7188	122	35	18	18	NUM
fumecheng-7188	122	36	,	,	PUNCT
fumecheng-7188	122	37	as	as	SCONJ
fumecheng-7188	122	38	described	describe	VERB
fumecheng-7188	122	39	in	in	ADP
fumecheng-7188	122	40	the	the	DET
fumecheng-7188	122	41	previous	previous	ADJ
fumecheng-7188	122	42	section	section	NOUN
fumecheng-7188	122	43	.	.	PUNCT
fumecheng-7188	123	1	respective	respective	ADJ
fumecheng-7188	123	2	d	d	NOUN
fumecheng-7188	123	3	-	-	PUNCT
fumecheng-7188	123	4	values	value	NOUN
fumecheng-7188	123	5	of	of	ADP
fumecheng-7188	123	6	the	the	DET
fumecheng-7188	123	7	statistics	statistic	NOUN
fumecheng-7188	123	8	were	be	AUX
fumecheng-7188	123	9	0.1789	0.1789	NUM
fumecheng-7188	123	10	,	,	PUNCT
fumecheng-7188	123	11	0.14551	0.14551	NUM
fumecheng-7188	123	12	and	and	CCONJ
fumecheng-7188	123	13	0.18754	0.18754	NUM
fumecheng-7188	123	14	,	,	PUNCT
fumecheng-7188	123	15	while	while	SCONJ
fumecheng-7188	123	16	p	p	NOUN
fumecheng-7188	123	17	-	-	PUNCT
fumecheng-7188	123	18	values	value	NOUN
fumecheng-7188	123	19	were	be	AUX
fumecheng-7188	123	20	0.07	0.07	NUM
fumecheng-7188	123	21	,	,	PUNCT
fumecheng-7188	123	22	0.22	0.22	NUM
fumecheng-7188	123	23	and	and	CCONJ
fumecheng-7188	123	24	0.05	0.05	NUM
fumecheng-7188	123	25	,	,	PUNCT
fumecheng-7188	123	26	respectively	respectively	ADV
fumecheng-7188	123	27	.	.	PUNCT
fumecheng-7188	124	1	hence	hence	ADV
fumecheng-7188	124	2	the	the	DET
fumecheng-7188	124	3	measurement	measurement	NOUN
fumecheng-7188	124	4	results	result	VERB
fumecheng-7188	124	5	in	in	ADP
fumecheng-7188	124	6	the	the	DET
fumecheng-7188	124	7	series	series	NOUN
fumecheng-7188	124	8	did	do	AUX
fumecheng-7188	124	9	not	not	PART
fumecheng-7188	124	10	differ	differ	VERB
fumecheng-7188	124	11	significantly	significantly	ADV
fumecheng-7188	124	12	from	from	ADP
fumecheng-7188	124	13	gaussian	gaussian	ADJ
fumecheng-7188	124	14	distribution	distribution	NOUN
fumecheng-7188	124	15	,	,	PUNCT
fumecheng-7188	124	16	despite	despite	SCONJ
fumecheng-7188	124	17	some	some	DET
fumecheng-7188	124	18	differences	difference	NOUN
fumecheng-7188	124	19	in	in	ADP
fumecheng-7188	124	20	statistical	statistical	ADJ
fumecheng-7188	124	21	parameters	parameter	NOUN
fumecheng-7188	124	22	.	.	PUNCT
fumecheng-7188	125	1	fig	fig	NOUN
fumecheng-7188	125	2	.	.	PUNCT
fumecheng-7188	126	1	4	4	NUM
fumecheng-7188	126	2	presents	present	VERB
fumecheng-7188	126	3	the	the	DET
fumecheng-7188	126	4	respective	respective	ADJ
fumecheng-7188	126	5	histograms	histogram	NOUN
fumecheng-7188	126	6	.	.	PUNCT
fumecheng-7188	127	1	128	128	NUM
fumecheng-7188	127	2	t.	t.	PROPN
fumecheng-7188	127	3	mazur	mazur	PROPN
fumecheng-7188	127	4	,	,	PUNCT
fumecheng-7188	127	5	m.	m.	PROPN
fumecheng-7188	127	6	rucki	rucki	PROPN
fumecheng-7188	127	7	,	,	PUNCT
fumecheng-7188	127	8	y.	y.	PROPN
fumecheng-7188	127	9	gutsalenko	gutsalenko	PROPN
fumecheng-7188	127	10	fig	fig	NOUN
fumecheng-7188	127	11	.	.	PUNCT
fumecheng-7188	128	1	4	4	NUM
fumecheng-7188	128	2	histograms	histogram	NOUN
fumecheng-7188	128	3	of	of	ADP
fumecheng-7188	128	4	the	the	DET
fumecheng-7188	128	5	measurement	measurement	NOUN
fumecheng-7188	128	6	results	result	NOUN
fumecheng-7188	128	7	of	of	ADP
fumecheng-7188	128	8	50	50	NUM
fumecheng-7188	128	9	repetitions	repetition	NOUN
fumecheng-7188	128	10	in	in	ADP
fumecheng-7188	128	11	the	the	DET
fumecheng-7188	128	12	series	series	NOUN
fumecheng-7188	128	13	no	no	NOUN
fumecheng-7188	128	14	.	.	PROPN
fumecheng-7188	128	15	9	9	NUM
fumecheng-7188	128	16	,	,	PUNCT
fumecheng-7188	128	17	17	17	NUM
fumecheng-7188	128	18	,	,	PUNCT
fumecheng-7188	128	19	and	and	CCONJ
fumecheng-7188	128	20	18	18	NUM
fumecheng-7188	128	21	knowing	know	VERB
fumecheng-7188	128	22	that	that	SCONJ
fumecheng-7188	128	23	the	the	DET
fumecheng-7188	128	24	distribution	distribution	NOUN
fumecheng-7188	128	25	of	of	ADP
fumecheng-7188	128	26	form	form	NOUN
fumecheng-7188	128	27	deviation	deviation	NOUN
fumecheng-7188	128	28	δ	δ	PROPN
fumecheng-7188	128	29	measurement	measurement	NOUN
fumecheng-7188	128	30	results	result	NOUN
fumecheng-7188	128	31	is	be	AUX
fumecheng-7188	128	32	normal	normal	ADJ
fumecheng-7188	128	33	,	,	PUNCT
fumecheng-7188	128	34	it	it	PRON
fumecheng-7188	128	35	is	be	AUX
fumecheng-7188	128	36	possible	possible	ADJ
fumecheng-7188	128	37	to	to	PART
fumecheng-7188	128	38	apply	apply	VERB
fumecheng-7188	128	39	the	the	DET
fumecheng-7188	128	40	student	student	NOUN
fumecheng-7188	128	41	-	-	PUNCT
fumecheng-7188	128	42	fisher	fisher	PROPN
fumecheng-7188	128	43	parameters	parameter	NOUN
fumecheng-7188	128	44	to	to	ADP
fumecheng-7188	128	45	the	the	DET
fumecheng-7188	128	46	smaller	small	ADJ
fumecheng-7188	128	47	series	series	NOUN
fumecheng-7188	128	48	of	of	ADP
fumecheng-7188	128	49	5	5	NUM
fumecheng-7188	128	50	,	,	PUNCT
fumecheng-7188	128	51	10	10	NUM
fumecheng-7188	128	52	and	and	CCONJ
fumecheng-7188	128	53	25	25	NUM
fumecheng-7188	128	54	repetitions	repetition	NOUN
fumecheng-7188	128	55	.	.	PUNCT
fumecheng-7188	129	1	thus	thus	ADV
fumecheng-7188	129	2	,	,	PUNCT
fumecheng-7188	129	3	confidence	confidence	NOUN
fumecheng-7188	129	4	interval	interval	NOUN
fumecheng-7188	129	5	ci	ci	PROPN
fumecheng-7188	129	6	can	can	AUX
fumecheng-7188	129	7	be	be	AUX
fumecheng-7188	129	8	calculated	calculate	VERB
fumecheng-7188	129	9	as	as	SCONJ
fumecheng-7188	129	10	follows	follow	VERB
fumecheng-7188	129	11	:	:	PUNCT
fumecheng-7188	129	12	ci	ci	PROPN
fumecheng-7188	129	13	=	=	SYM
fumecheng-7188	129	14	tα	tα	PROPN
fumecheng-7188	129	15	,	,	PUNCT
fumecheng-7188	129	16	n-1	n-1	NOUN
fumecheng-7188	129	17	×sn	×sn	PROPN
fumecheng-7188	129	18	(	(	PUNCT
fumecheng-7188	129	19	1	1	NUM
fumecheng-7188	129	20	)	)	PUNCT
fumecheng-7188	129	21	where	where	SCONJ
fumecheng-7188	129	22	:	:	PUNCT
fumecheng-7188	129	23	tα	tα	NUM
fumecheng-7188	129	24	,	,	PUNCT
fumecheng-7188	129	25	n-1	n-1	NUM
fumecheng-7188	129	26	–	–	PUNCT
fumecheng-7188	129	27	student	student	NOUN
fumecheng-7188	129	28	-	-	PUNCT
fumecheng-7188	129	29	fisher	fisher	PROPN
fumecheng-7188	129	30	distribution	distribution	NOUN
fumecheng-7188	129	31	quantile	quantile	NOUN
fumecheng-7188	129	32	,	,	PUNCT
fumecheng-7188	129	33	n	n	CCONJ
fumecheng-7188	129	34	–	–	PUNCT
fumecheng-7188	129	35	number	number	NOUN
fumecheng-7188	129	36	of	of	ADP
fumecheng-7188	129	37	the	the	DET
fumecheng-7188	129	38	repetitions	repetition	NOUN
fumecheng-7188	129	39	in	in	ADP
fumecheng-7188	129	40	series	series	NOUN
fumecheng-7188	129	41	,	,	PUNCT
fumecheng-7188	129	42	sn	sn	PROPN
fumecheng-7188	129	43	–	–	PUNCT
fumecheng-7188	129	44	standard	standard	ADJ
fumecheng-7188	129	45	deviation	deviation	NOUN
fumecheng-7188	129	46	.	.	PUNCT
fumecheng-7188	130	1	assuming	assume	VERB
fumecheng-7188	130	2	confidence	confidence	NOUN
fumecheng-7188	130	3	level	level	NOUN
fumecheng-7188	130	4	p	p	NOUN
fumecheng-7188	130	5	=	=	NOUN
fumecheng-7188	130	6	0.99	0.99	NUM
fumecheng-7188	130	7	,	,	PUNCT
fumecheng-7188	130	8	the	the	DET
fumecheng-7188	130	9	respective	respective	ADJ
fumecheng-7188	130	10	quantile	quantile	ADJ
fumecheng-7188	130	11	value	value	NOUN
fumecheng-7188	130	12	for	for	ADP
fumecheng-7188	130	13	5	5	NUM
fumecheng-7188	130	14	repetitions	repetition	NOUN
fumecheng-7188	130	15	is	be	AUX
fumecheng-7188	130	16	tα	tα	VERB
fumecheng-7188	130	17	,	,	PUNCT
fumecheng-7188	130	18	n-1	n-1	NOUN
fumecheng-7188	130	19	=	=	SYM
fumecheng-7188	130	20	4.604	4.604	NUM
fumecheng-7188	130	21	,	,	PUNCT
fumecheng-7188	130	22	for	for	ADP
fumecheng-7188	130	23	10	10	NUM
fumecheng-7188	130	24	repetitions	repetition	NOUN
fumecheng-7188	130	25	tα	tα	ADP
fumecheng-7188	130	26	,	,	PUNCT
fumecheng-7188	130	27	n-1	n-1	NOUN
fumecheng-7188	130	28	=	=	PUNCT
fumecheng-7188	130	29	3.250	3.250	NUM
fumecheng-7188	130	30	,	,	PUNCT
fumecheng-7188	130	31	and	and	CCONJ
fumecheng-7188	130	32	for	for	ADP
fumecheng-7188	130	33	25	25	NUM
fumecheng-7188	130	34	repetitions	repetition	NOUN
fumecheng-7188	130	35	tα	tα	ADP
fumecheng-7188	130	36	,	,	PUNCT
fumecheng-7188	130	37	n-1	n-1	NOUN
fumecheng-7188	131	1	=	=	NOUN
fumecheng-7188	132	1	2.797	2.797	NUM
fumecheng-7188	132	2	[	[	X
fumecheng-7188	132	3	31	31	NUM
fumecheng-7188	132	4	]	]	SYM
fumecheng-7188	132	5	.	.	PUNCT
fumecheng-7188	132	6	4.1	4.1	NUM
fumecheng-7188	132	7	.	.	PUNCT
fumecheng-7188	132	8	effect	effect	NOUN
fumecheng-7188	132	9	of	of	ADP
fumecheng-7188	132	10	scanning	scan	VERB
fumecheng-7188	132	11	velocity	velocity	NOUN
fumecheng-7188	132	12	on	on	ADP
fumecheng-7188	132	13	form	form	NOUN
fumecheng-7188	132	14	deviation	deviation	NOUN
fumecheng-7188	132	15	in	in	ADP
fumecheng-7188	132	16	tables	table	NOUN
fumecheng-7188	132	17	2	2	NUM
fumecheng-7188	132	18	-	-	SYM
fumecheng-7188	132	19	5	5	NUM
fumecheng-7188	132	20	,	,	PUNCT
fumecheng-7188	132	21	there	there	PRON
fumecheng-7188	132	22	are	be	VERB
fumecheng-7188	132	23	collected	collect	VERB
fumecheng-7188	132	24	measurement	measurement	NOUN
fumecheng-7188	132	25	results	result	NOUN
fumecheng-7188	132	26	for	for	ADP
fumecheng-7188	132	27	form	form	NOUN
fumecheng-7188	132	28	deviation	deviation	NOUN
fumecheng-7188	132	29	δ	δ	PROPN
fumecheng-7188	132	30	obtained	obtain	VERB
fumecheng-7188	132	31	at	at	ADP
fumecheng-7188	132	32	different	different	ADJ
fumecheng-7188	132	33	scanning	scanning	NOUN
fumecheng-7188	132	34	velocities	velocity	NOUN
fumecheng-7188	132	35	vs	vs	ADP
fumecheng-7188	132	36	and	and	CCONJ
fumecheng-7188	132	37	probe	probe	VERB
fumecheng-7188	132	38	deflection	deflection	PROPN
fumecheng-7188	132	39	pd	pd	PROPN
fumecheng-7188	132	40	,	,	PUNCT
fumecheng-7188	132	41	together	together	ADV
fumecheng-7188	132	42	with	with	ADP
fumecheng-7188	132	43	the	the	DET
fumecheng-7188	132	44	time	time	NOUN
fumecheng-7188	132	45	of	of	ADP
fumecheng-7188	132	46	measurement	measurement	NOUN
fumecheng-7188	132	47	t.	t.	PROPN
fumecheng-7188	133	1	the	the	DET
fumecheng-7188	133	2	series	series	NOUN
fumecheng-7188	133	3	numbers	number	NOUN
fumecheng-7188	133	4	correspond	correspond	VERB
fumecheng-7188	133	5	with	with	ADP
fumecheng-7188	133	6	the	the	DET
fumecheng-7188	133	7	ones	one	NOUN
fumecheng-7188	133	8	specified	specify	VERB
fumecheng-7188	133	9	above	above	ADV
fumecheng-7188	133	10	in	in	ADP
fumecheng-7188	133	11	table	table	NOUN
fumecheng-7188	133	12	1	1	NUM
fumecheng-7188	133	13	.	.	PUNCT
fumecheng-7188	133	14	table	table	NOUN
fumecheng-7188	133	15	4	4	NUM
fumecheng-7188	133	16	contains	contain	VERB
fumecheng-7188	133	17	results	result	NOUN
fumecheng-7188	133	18	for	for	ADP
fumecheng-7188	133	19	probe	probe	NOUN
fumecheng-7188	133	20	deflection	deflection	NOUN
fumecheng-7188	133	21	pd	pd	PROPN
fumecheng-7188	134	1	=	=	PUNCT
fumecheng-7188	134	2	0.15	0.15	NUM
fumecheng-7188	134	3	mm	mm	NOUN
fumecheng-7188	134	4	only	only	ADV
fumecheng-7188	134	5	for	for	ADP
fumecheng-7188	134	6	one	one	NUM
fumecheng-7188	134	7	series	series	NOUN
fumecheng-7188	134	8	with	with	ADP
fumecheng-7188	134	9	5	5	NUM
fumecheng-7188	134	10	repetitions	repetition	NOUN
fumecheng-7188	134	11	.	.	PUNCT
fumecheng-7188	135	1	table	table	NOUN
fumecheng-7188	135	2	2	2	NUM
fumecheng-7188	135	3	form	form	NOUN
fumecheng-7188	135	4	deviation	deviation	NOUN
fumecheng-7188	135	5	δ	δ	NOUN
fumecheng-7188	135	6	obtained	obtain	VERB
fumecheng-7188	135	7	at	at	ADP
fumecheng-7188	135	8	vs	vs	ADP
fumecheng-7188	135	9	=	=	SYM
fumecheng-7188	135	10	1	1	NUM
fumecheng-7188	135	11	mm	mm	PROPN
fumecheng-7188	135	12	/	/	SYM
fumecheng-7188	135	13	s	s	PROPN
fumecheng-7188	135	14	(	(	PUNCT
fumecheng-7188	135	15	series	series	PROPN
fumecheng-7188	135	16	1	1	NUM
fumecheng-7188	135	17	-	-	SYM
fumecheng-7188	135	18	4	4	NUM
fumecheng-7188	135	19	)	)	PUNCT
fumecheng-7188	135	20	pd=	pd=	NOUN
fumecheng-7188	135	21	0.15	0.15	NUM
fumecheng-7188	135	22	mm	mm	INTJ
fumecheng-7188	135	23	pd=	pd=	ADJ
fumecheng-7188	135	24	0.2	0.2	NUM
fumecheng-7188	135	25	mm	mm	INTJ
fumecheng-7188	136	1	pd=	pd=	ADJ
fumecheng-7188	136	2	0.3	0.3	NUM
fumecheng-7188	136	3	mm	mm	NOUN
fumecheng-7188	136	4	pd=	pd=	PROPN
fumecheng-7188	136	5	0.4	0.4	NUM
fumecheng-7188	136	6	mm	mm	NOUN
fumecheng-7188	136	7	repetition	repetition	NOUN
fumecheng-7188	136	8	no	no	INTJ
fumecheng-7188	136	9	.	.	PUNCT
fumecheng-7188	137	1	δ	δ	X
fumecheng-7188	138	1	[	[	X
fumecheng-7188	138	2	mm	mm	X
fumecheng-7188	138	3	]	]	X
fumecheng-7188	138	4	t	t	NOUN
fumecheng-7188	139	1	[	[	X
fumecheng-7188	139	2	s	s	X
fumecheng-7188	139	3	]	]	X
fumecheng-7188	139	4	δ	δ	PROPN
fumecheng-7188	140	1	[	[	X
fumecheng-7188	140	2	mm	mm	X
fumecheng-7188	140	3	]	]	X
fumecheng-7188	140	4	t	t	NOUN
fumecheng-7188	141	1	[	[	X
fumecheng-7188	141	2	s	s	X
fumecheng-7188	141	3	]	]	X
fumecheng-7188	141	4	δ	δ	PROPN
fumecheng-7188	142	1	[	[	X
fumecheng-7188	142	2	mm	mm	X
fumecheng-7188	142	3	]	]	X
fumecheng-7188	142	4	t	t	NOUN
fumecheng-7188	143	1	[	[	X
fumecheng-7188	143	2	s	s	X
fumecheng-7188	143	3	]	]	X
fumecheng-7188	143	4	δ[mm	δ[mm	NOUN
fumecheng-7188	143	5	]	]	PUNCT
fumecheng-7188	143	6	t	t	X
fumecheng-7188	144	1	[	[	X
fumecheng-7188	144	2	s	s	X
fumecheng-7188	144	3	]	]	X
fumecheng-7188	144	4	1	1	NUM
fumecheng-7188	144	5	0.118	0.118	NUM
fumecheng-7188	144	6	198	198	NUM
fumecheng-7188	144	7	0.115	0.115	NUM
fumecheng-7188	144	8	179	179	NUM
fumecheng-7188	144	9	0.114	0.114	NUM
fumecheng-7188	144	10	156	156	NUM
fumecheng-7188	144	11	0.112	0.112	NUM
fumecheng-7188	144	12	145	145	NUM
fumecheng-7188	144	13	2	2	NUM
fumecheng-7188	144	14	0.120	0.120	NUM
fumecheng-7188	144	15	203	203	NUM
fumecheng-7188	144	16	0.116	0.116	NUM
fumecheng-7188	144	17	181	181	NUM
fumecheng-7188	144	18	0.113	0.113	NUM
fumecheng-7188	144	19	155	155	NUM
fumecheng-7188	144	20	0.112	0.112	NUM
fumecheng-7188	144	21	145	145	NUM
fumecheng-7188	144	22	3	3	NUM
fumecheng-7188	144	23	0.116	0.116	NUM
fumecheng-7188	144	24	205	205	NUM
fumecheng-7188	144	25	0.115	0.115	NUM
fumecheng-7188	144	26	177	177	NUM
fumecheng-7188	144	27	0.112	0.112	NUM
fumecheng-7188	144	28	154	154	NUM
fumecheng-7188	144	29	0.111	0.111	NUM
fumecheng-7188	144	30	146	146	NUM
fumecheng-7188	144	31	4	4	NUM
fumecheng-7188	144	32	0.118	0.118	NUM
fumecheng-7188	144	33	201	201	NUM
fumecheng-7188	144	34	0.116	0.116	NUM
fumecheng-7188	144	35	177	177	NUM
fumecheng-7188	144	36	0.113	0.113	NUM
fumecheng-7188	144	37	155	155	NUM
fumecheng-7188	144	38	0.111	0.111	NUM
fumecheng-7188	144	39	147	147	NUM
fumecheng-7188	144	40	5	5	NUM
fumecheng-7188	144	41	0.119	0.119	NUM
fumecheng-7188	144	42	199	199	NUM
fumecheng-7188	144	43	0.118	0.118	NUM
fumecheng-7188	144	44	178	178	NUM
fumecheng-7188	144	45	0.115	0.115	NUM
fumecheng-7188	144	46	154	154	NUM
fumecheng-7188	144	47	0.112	0.112	NUM
fumecheng-7188	144	48	146	146	NUM
fumecheng-7188	144	49	mean	mean	ADJ
fumecheng-7188	144	50	value	value	NOUN
fumecheng-7188	144	51	0.118	0.118	NUM
fumecheng-7188	144	52	201.2	201.2	NUM
fumecheng-7188	144	53	0.116	0.116	NUM
fumecheng-7188	144	54	178.4	178.4	NUM
fumecheng-7188	144	55	0.113	0.113	NUM
fumecheng-7188	144	56	154.8	154.8	NUM
fumecheng-7188	144	57	0.112	0.112	NUM
fumecheng-7188	144	58	145.8	145.8	NUM
fumecheng-7188	144	59	standard	standard	ADJ
fumecheng-7188	144	60	deviation	deviation	NOUN
fumecheng-7188	144	61	sn	sn	NOUN
fumecheng-7188	144	62	0.001	0.001	NUM
fumecheng-7188	144	63	2.864	2.864	NUM
fumecheng-7188	144	64	0.001	0.001	NUM
fumecheng-7188	144	65	1.673	1.673	NUM
fumecheng-7188	144	66	0.001	0.001	NUM
fumecheng-7188	144	67	0.837	0.837	NUM
fumecheng-7188	144	68	0.001	0.001	NUM
fumecheng-7188	144	69	0.837	0.837	NUM
fumecheng-7188	144	70	confidence	confidence	NOUN
fumecheng-7188	144	71	interval	interval	NOUN
fumecheng-7188	144	72	0.007	0.007	NUM
fumecheng-7188	144	73	13.18	13.18	NUM
fumecheng-7188	144	74	0.006	0.006	NUM
fumecheng-7188	144	75	7.7	7.7	NUM
fumecheng-7188	144	76	0.005	0.005	NUM
fumecheng-7188	144	77	3.85	3.85	NUM
fumecheng-7188	144	78	0.003	0.003	NUM
fumecheng-7188	144	79	3.85	3.85	NUM
fumecheng-7188	144	80	accuracy	accuracy	NOUN
fumecheng-7188	144	81	analysis	analysis	NOUN
fumecheng-7188	144	82	of	of	ADP
fumecheng-7188	144	83	the	the	DET
fumecheng-7188	144	84	curved	curved	ADJ
fumecheng-7188	144	85	profile	profile	PROPN
fumecheng-7188	144	86	measurement	measurement	NOUN
fumecheng-7188	144	87	with	with	ADP
fumecheng-7188	144	88	cmm	cmm	NOUN
fumecheng-7188	144	89	:	:	PUNCT
fumecheng-7188	144	90	a	a	DET
fumecheng-7188	144	91	case	case	NOUN
fumecheng-7188	144	92	study	study	NOUN
fumecheng-7188	144	93	129	129	NUM
fumecheng-7188	144	94	table	table	NOUN
fumecheng-7188	144	95	3	3	NUM
fumecheng-7188	144	96	form	form	NOUN
fumecheng-7188	144	97	deviation	deviation	NOUN
fumecheng-7188	144	98	δ	δ	PROPN
fumecheng-7188	144	99	obtained	obtain	VERB
fumecheng-7188	144	100	at	at	ADP
fumecheng-7188	144	101	vs	vs	ADP
fumecheng-7188	144	102	=	=	SYM
fumecheng-7188	144	103	2	2	NUM
fumecheng-7188	144	104	mm	mm	PROPN
fumecheng-7188	144	105	/	/	SYM
fumecheng-7188	144	106	s	s	PROPN
fumecheng-7188	144	107	(	(	PUNCT
fumecheng-7188	144	108	series	series	PROPN
fumecheng-7188	144	109	5	5	NUM
fumecheng-7188	144	110	-	-	SYM
fumecheng-7188	144	111	8)	8)	NUM
fumecheng-7188	144	112	pd=	pd=	NOUN
fumecheng-7188	144	113	0.15	0.15	NUM
fumecheng-7188	144	114	mm	mm	INTJ
fumecheng-7188	144	115	pd=	pd=	ADJ
fumecheng-7188	144	116	0.2	0.2	NUM
fumecheng-7188	144	117	mm	mm	INTJ
fumecheng-7188	145	1	pd=	pd=	ADJ
fumecheng-7188	145	2	0.3	0.3	NUM
fumecheng-7188	145	3	mm	mm	NOUN
fumecheng-7188	145	4	pd=	pd=	PROPN
fumecheng-7188	145	5	0.4	0.4	NUM
fumecheng-7188	145	6	mm	mm	NOUN
fumecheng-7188	145	7	repetition	repetition	NOUN
fumecheng-7188	145	8	no	no	INTJ
fumecheng-7188	145	9	.	.	PUNCT
fumecheng-7188	146	1	δ	δ	X
fumecheng-7188	147	1	[	[	X
fumecheng-7188	147	2	mm	mm	X
fumecheng-7188	147	3	]	]	X
fumecheng-7188	147	4	t	t	NOUN
fumecheng-7188	148	1	[	[	X
fumecheng-7188	148	2	s	s	X
fumecheng-7188	148	3	]	]	X
fumecheng-7188	148	4	δ	δ	PROPN
fumecheng-7188	149	1	[	[	X
fumecheng-7188	149	2	mm	mm	X
fumecheng-7188	149	3	]	]	X
fumecheng-7188	149	4	t	t	NOUN
fumecheng-7188	150	1	[	[	X
fumecheng-7188	150	2	s	s	X
fumecheng-7188	150	3	]	]	X
fumecheng-7188	150	4	δ	δ	PROPN
fumecheng-7188	151	1	[	[	X
fumecheng-7188	151	2	mm	mm	X
fumecheng-7188	151	3	]	]	X
fumecheng-7188	151	4	t	t	NOUN
fumecheng-7188	152	1	[	[	X
fumecheng-7188	152	2	s	s	X
fumecheng-7188	152	3	]	]	X
fumecheng-7188	152	4	δ[mm	δ[mm	NOUN
fumecheng-7188	152	5	]	]	PUNCT
fumecheng-7188	152	6	t	t	X
fumecheng-7188	153	1	[	[	X
fumecheng-7188	153	2	s	s	X
fumecheng-7188	153	3	]	]	X
fumecheng-7188	153	4	1	1	NUM
fumecheng-7188	153	5	0.119	0.119	NUM
fumecheng-7188	153	6	95	95	NUM
fumecheng-7188	153	7	0.115	0.115	NUM
fumecheng-7188	153	8	84	84	NUM
fumecheng-7188	153	9	0.114	0.114	NUM
fumecheng-7188	153	10	75	75	NUM
fumecheng-7188	153	11	0.112	0.112	NUM
fumecheng-7188	153	12	75	75	NUM
fumecheng-7188	153	13	2	2	NUM
fumecheng-7188	153	14	0.116	0.116	NUM
fumecheng-7188	153	15	97	97	NUM
fumecheng-7188	153	16	0.115	0.115	NUM
fumecheng-7188	153	17	84	84	NUM
fumecheng-7188	153	18	0.116	0.116	NUM
fumecheng-7188	153	19	77	77	NUM
fumecheng-7188	153	20	0.112	0.112	NUM
fumecheng-7188	153	21	75	75	NUM
fumecheng-7188	153	22	3	3	NUM
fumecheng-7188	153	23	0.115	0.115	NUM
fumecheng-7188	153	24	95	95	NUM
fumecheng-7188	153	25	0.115	0.115	NUM
fumecheng-7188	153	26	84	84	NUM
fumecheng-7188	153	27	0.112	0.112	NUM
fumecheng-7188	153	28	77	77	NUM
fumecheng-7188	153	29	0.114	0.114	NUM
fumecheng-7188	153	30	73	73	NUM
fumecheng-7188	153	31	4	4	NUM
fumecheng-7188	153	32	0.116	0.116	NUM
fumecheng-7188	153	33	97	97	NUM
fumecheng-7188	153	34	0.115	0.115	NUM
fumecheng-7188	153	35	84	84	NUM
fumecheng-7188	153	36	0.113	0.113	NUM
fumecheng-7188	153	37	77	77	NUM
fumecheng-7188	153	38	0.112	0.112	NUM
fumecheng-7188	153	39	74	74	NUM
fumecheng-7188	153	40	5	5	NUM
fumecheng-7188	153	41	0.118	0.118	NUM
fumecheng-7188	153	42	95	95	NUM
fumecheng-7188	153	43	0.114	0.114	NUM
fumecheng-7188	153	44	84	84	NUM
fumecheng-7188	153	45	0.118	0.118	NUM
fumecheng-7188	153	46	78	78	NUM
fumecheng-7188	153	47	0.114	0.114	NUM
fumecheng-7188	153	48	74	74	NUM
fumecheng-7188	153	49	mean	mean	NOUN
fumecheng-7188	153	50	value	value	NOUN
fumecheng-7188	153	51	0.117	0.117	NUM
fumecheng-7188	153	52	95.8	95.8	NUM
fumecheng-7188	153	53	0.115	0.115	NUM
fumecheng-7188	153	54	84.0	84.0	NUM
fumecheng-7188	153	55	0.115	0.115	NUM
fumecheng-7188	153	56	76.8	76.8	NUM
fumecheng-7188	153	57	0.113	0.113	NUM
fumecheng-7188	153	58	74.2	74.2	NUM
fumecheng-7188	153	59	standard	standard	ADJ
fumecheng-7188	153	60	deviation	deviation	NOUN
fumecheng-7188	153	61	sn	sn	NOUN
fumecheng-7188	153	62	0.002	0.002	NUM
fumecheng-7188	153	63	1.095	1.095	NUM
fumecheng-7188	153	64	0.000	0.000	NUM
fumecheng-7188	153	65	0.000	0.000	NUM
fumecheng-7188	153	66	0.002	0.002	NUM
fumecheng-7188	153	67	1.095	1.095	NUM
fumecheng-7188	153	68	0.001	0.001	NUM
fumecheng-7188	153	69	0.837	0.837	NUM
fumecheng-7188	153	70	confidence	confidence	NOUN
fumecheng-7188	153	71	interval	interval	NOUN
fumecheng-7188	153	72	0.008	0.008	NUM
fumecheng-7188	153	73	5.04	5.04	NUM
fumecheng-7188	153	74	0.002	0.002	NUM
fumecheng-7188	153	75	0.000	0.000	NUM
fumecheng-7188	153	76	0.011	0.011	NUM
fumecheng-7188	153	77	5.04	5.04	NUM
fumecheng-7188	153	78	0.005	0.005	NUM
fumecheng-7188	153	79	3.85	3.85	NUM
fumecheng-7188	153	80	table	table	NOUN
fumecheng-7188	153	81	4	4	NUM
fumecheng-7188	153	82	form	form	NOUN
fumecheng-7188	153	83	deviation	deviation	NOUN
fumecheng-7188	153	84	δ	δ	NOUN
fumecheng-7188	153	85	obtained	obtain	VERB
fumecheng-7188	153	86	at	at	ADP
fumecheng-7188	153	87	vs	vs	ADP
fumecheng-7188	153	88	=	=	SYM
fumecheng-7188	153	89	3	3	NUM
fumecheng-7188	153	90	mm	mm	PROPN
fumecheng-7188	153	91	/	/	SYM
fumecheng-7188	153	92	s	s	PROPN
fumecheng-7188	153	93	(	(	PUNCT
fumecheng-7188	153	94	series	series	PROPN
fumecheng-7188	153	95	9	9	NUM
fumecheng-7188	153	96	-	-	SYM
fumecheng-7188	153	97	12	12	NUM
fumecheng-7188	153	98	)	)	PUNCT
fumecheng-7188	153	99	pd=	pd=	NOUN
fumecheng-7188	153	100	0.15	0.15	NUM
fumecheng-7188	153	101	mm	mm	INTJ
fumecheng-7188	154	1	pd=	pd=	ADJ
fumecheng-7188	154	2	0.2	0.2	NUM
fumecheng-7188	154	3	mm	mm	INTJ
fumecheng-7188	154	4	pd=	pd=	ADJ
fumecheng-7188	154	5	0.3	0.3	NUM
fumecheng-7188	154	6	mm	mm	NOUN
fumecheng-7188	154	7	pd=	pd=	PROPN
fumecheng-7188	154	8	0.4	0.4	NUM
fumecheng-7188	154	9	mm	mm	NOUN
fumecheng-7188	154	10	repetition	repetition	NOUN
fumecheng-7188	154	11	no	no	INTJ
fumecheng-7188	154	12	.	.	PUNCT
fumecheng-7188	155	1	δ	δ	X
fumecheng-7188	156	1	[	[	X
fumecheng-7188	156	2	mm	mm	X
fumecheng-7188	156	3	]	]	X
fumecheng-7188	156	4	t	t	NOUN
fumecheng-7188	157	1	[	[	X
fumecheng-7188	157	2	s	s	X
fumecheng-7188	157	3	]	]	X
fumecheng-7188	157	4	δ	δ	PROPN
fumecheng-7188	158	1	[	[	X
fumecheng-7188	158	2	mm	mm	X
fumecheng-7188	158	3	]	]	X
fumecheng-7188	158	4	t	t	NOUN
fumecheng-7188	159	1	[	[	X
fumecheng-7188	159	2	s	s	X
fumecheng-7188	159	3	]	]	X
fumecheng-7188	159	4	δ	δ	PROPN
fumecheng-7188	160	1	[	[	X
fumecheng-7188	160	2	mm	mm	X
fumecheng-7188	160	3	]	]	X
fumecheng-7188	160	4	t	t	NOUN
fumecheng-7188	161	1	[	[	X
fumecheng-7188	161	2	s	s	X
fumecheng-7188	161	3	]	]	X
fumecheng-7188	161	4	δ[mm	δ[mm	NOUN
fumecheng-7188	161	5	]	]	PUNCT
fumecheng-7188	161	6	t	t	X
fumecheng-7188	162	1	[	[	X
fumecheng-7188	162	2	s	s	X
fumecheng-7188	162	3	]	]	X
fumecheng-7188	162	4	1	1	NUM
fumecheng-7188	162	5	0.120	0.120	NUM
fumecheng-7188	162	6	61	61	NUM
fumecheng-7188	162	7	0.117	0.117	NUM
fumecheng-7188	162	8	56	56	NUM
fumecheng-7188	162	9	0.116	0.116	NUM
fumecheng-7188	162	10	47	47	NUM
fumecheng-7188	162	11	0.113	0.113	NUM
fumecheng-7188	162	12	47	47	NUM
fumecheng-7188	162	13	2	2	NUM
fumecheng-7188	162	14	0.117	0.117	NUM
fumecheng-7188	162	15	62	62	NUM
fumecheng-7188	162	16	0.116	0.116	NUM
fumecheng-7188	162	17	56	56	NUM
fumecheng-7188	162	18	0.116	0.116	NUM
fumecheng-7188	162	19	50	50	NUM
fumecheng-7188	162	20	0.110	0.110	NUM
fumecheng-7188	162	21	47	47	NUM
fumecheng-7188	162	22	3	3	NUM
fumecheng-7188	162	23	0.117	0.117	NUM
fumecheng-7188	162	24	63	63	NUM
fumecheng-7188	162	25	0.113	0.113	NUM
fumecheng-7188	162	26	57	57	NUM
fumecheng-7188	162	27	0.113	0.113	NUM
fumecheng-7188	162	28	50	50	NUM
fumecheng-7188	162	29	0.119	0.119	NUM
fumecheng-7188	162	30	49	49	NUM
fumecheng-7188	162	31	4	4	NUM
fumecheng-7188	162	32	0.116	0.116	NUM
fumecheng-7188	162	33	62	62	NUM
fumecheng-7188	162	34	0.115	0.115	NUM
fumecheng-7188	162	35	57	57	NUM
fumecheng-7188	162	36	0.115	0.115	NUM
fumecheng-7188	162	37	51	51	NUM
fumecheng-7188	162	38	0.114	0.114	NUM
fumecheng-7188	162	39	50	50	NUM
fumecheng-7188	162	40	5	5	NUM
fumecheng-7188	162	41	0.116	0.116	NUM
fumecheng-7188	162	42	61	61	NUM
fumecheng-7188	162	43	0.113	0.113	NUM
fumecheng-7188	162	44	55	55	NUM
fumecheng-7188	162	45	0.116	0.116	NUM
fumecheng-7188	162	46	50	50	NUM
fumecheng-7188	162	47	0.112	0.112	NUM
fumecheng-7188	162	48	49	49	NUM
fumecheng-7188	162	49	mean	mean	NOUN
fumecheng-7188	162	50	value	value	NOUN
fumecheng-7188	162	51	0.117	0.117	NUM
fumecheng-7188	162	52	61.8	61.8	NUM
fumecheng-7188	162	53	0.115	0.115	NUM
fumecheng-7188	162	54	56.2	56.2	NUM
fumecheng-7188	162	55	0.115	0.115	NUM
fumecheng-7188	162	56	49.6	49.6	NUM
fumecheng-7188	162	57	0.114	0.114	NUM
fumecheng-7188	162	58	48.4	48.4	NUM
fumecheng-7188	162	59	standard	standard	ADJ
fumecheng-7188	162	60	deviation	deviation	NOUN
fumecheng-7188	162	61	sn	sn	NOUN
fumecheng-7188	162	62	0.002	0.002	NUM
fumecheng-7188	162	63	0.837	0.837	NUM
fumecheng-7188	162	64	0.002	0.002	NUM
fumecheng-7188	162	65	0.837	0.837	NUM
fumecheng-7188	162	66	0.001	0.001	NUM
fumecheng-7188	162	67	1.517	1.517	NUM
fumecheng-7188	162	68	0.003	0.003	NUM
fumecheng-7188	162	69	1.342	1.342	NUM
fumecheng-7188	162	70	confidence	confidence	NOUN
fumecheng-7188	162	71	interval	interval	NOUN
fumecheng-7188	162	72	0.008	0.008	NUM
fumecheng-7188	162	73	3.85	3.85	NUM
fumecheng-7188	162	74	0.008	0.008	NUM
fumecheng-7188	162	75	3.85	3.85	NUM
fumecheng-7188	162	76	0.006	0.006	NUM
fumecheng-7188	162	77	6.98	6.98	NUM
fumecheng-7188	162	78	0.015	0.015	NUM
fumecheng-7188	162	79	6.18	6.18	NUM
fumecheng-7188	162	80	table	table	NOUN
fumecheng-7188	162	81	5	5	NUM
fumecheng-7188	162	82	form	form	NOUN
fumecheng-7188	162	83	deviation	deviation	NOUN
fumecheng-7188	162	84	δ	δ	NOUN
fumecheng-7188	162	85	obtained	obtain	VERB
fumecheng-7188	162	86	at	at	ADP
fumecheng-7188	162	87	vs	vs	ADP
fumecheng-7188	162	88	=	=	SYM
fumecheng-7188	162	89	1	1	NUM
fumecheng-7188	162	90	mm	mm	PROPN
fumecheng-7188	162	91	/	/	SYM
fumecheng-7188	162	92	s	s	PROPN
fumecheng-7188	162	93	(	(	PUNCT
fumecheng-7188	162	94	series	series	PROPN
fumecheng-7188	162	95	1	1	NUM
fumecheng-7188	162	96	-	-	SYM
fumecheng-7188	162	97	4	4	NUM
fumecheng-7188	162	98	)	)	PUNCT
fumecheng-7188	162	99	pd=	pd=	NOUN
fumecheng-7188	162	100	0.15	0.15	NUM
fumecheng-7188	162	101	mm	mm	INTJ
fumecheng-7188	162	102	pd=	pd=	ADJ
fumecheng-7188	162	103	0.2	0.2	NUM
fumecheng-7188	162	104	mm	mm	INTJ
fumecheng-7188	162	105	pd=	pd=	ADJ
fumecheng-7188	162	106	0.3	0.3	NUM
fumecheng-7188	162	107	mm	mm	NOUN
fumecheng-7188	162	108	pd=	pd=	PROPN
fumecheng-7188	162	109	0.4	0.4	NUM
fumecheng-7188	162	110	mm	mm	NOUN
fumecheng-7188	162	111	repetition	repetition	NOUN
fumecheng-7188	162	112	no	no	INTJ
fumecheng-7188	162	113	.	.	PUNCT
fumecheng-7188	163	1	δ	δ	X
fumecheng-7188	164	1	[	[	X
fumecheng-7188	164	2	mm	mm	X
fumecheng-7188	164	3	]	]	X
fumecheng-7188	164	4	t	t	NOUN
fumecheng-7188	165	1	[	[	X
fumecheng-7188	165	2	s	s	X
fumecheng-7188	165	3	]	]	X
fumecheng-7188	165	4	δ	δ	PROPN
fumecheng-7188	166	1	[	[	X
fumecheng-7188	166	2	mm	mm	X
fumecheng-7188	166	3	]	]	X
fumecheng-7188	166	4	t	t	NOUN
fumecheng-7188	167	1	[	[	X
fumecheng-7188	167	2	s	s	X
fumecheng-7188	167	3	]	]	X
fumecheng-7188	167	4	δ	δ	PROPN
fumecheng-7188	168	1	[	[	X
fumecheng-7188	168	2	mm	mm	X
fumecheng-7188	168	3	]	]	X
fumecheng-7188	168	4	t	t	NOUN
fumecheng-7188	169	1	[	[	X
fumecheng-7188	169	2	s	s	X
fumecheng-7188	169	3	]	]	X
fumecheng-7188	169	4	δ[mm	δ[mm	NOUN
fumecheng-7188	169	5	]	]	PUNCT
fumecheng-7188	169	6	t	t	X
fumecheng-7188	170	1	[	[	X
fumecheng-7188	170	2	s	s	X
fumecheng-7188	170	3	]	]	X
fumecheng-7188	170	4	1	1	NUM
fumecheng-7188	170	5	0.120	0.120	NUM
fumecheng-7188	170	6	50	50	NUM
fumecheng-7188	170	7	0.113	0.113	NUM
fumecheng-7188	170	8	46	46	NUM
fumecheng-7188	170	9	0.115	0.115	NUM
fumecheng-7188	170	10	42	42	NUM
fumecheng-7188	170	11	0.121	0.121	NUM
fumecheng-7188	170	12	38	38	NUM
fumecheng-7188	170	13	2	2	NUM
fumecheng-7188	170	14	0.118	0.118	NUM
fumecheng-7188	170	15	49	49	NUM
fumecheng-7188	170	16	0.115	0.115	NUM
fumecheng-7188	170	17	46	46	NUM
fumecheng-7188	170	18	0.117	0.117	NUM
fumecheng-7188	170	19	40	40	NUM
fumecheng-7188	170	20	0.114	0.114	NUM
fumecheng-7188	170	21	38	38	NUM
fumecheng-7188	170	22	3	3	NUM
fumecheng-7188	170	23	0.117	0.117	NUM
fumecheng-7188	170	24	49	49	NUM
fumecheng-7188	170	25	0.117	0.117	NUM
fumecheng-7188	170	26	46	46	NUM
fumecheng-7188	170	27	0.115	0.115	NUM
fumecheng-7188	170	28	41	41	NUM
fumecheng-7188	170	29	0.114	0.114	NUM
fumecheng-7188	170	30	37	37	NUM
fumecheng-7188	170	31	4	4	NUM
fumecheng-7188	170	32	0.115	0.115	NUM
fumecheng-7188	170	33	47	47	NUM
fumecheng-7188	170	34	0.117	0.117	NUM
fumecheng-7188	170	35	46	46	NUM
fumecheng-7188	170	36	0.117	0.117	NUM
fumecheng-7188	170	37	41	41	NUM
fumecheng-7188	170	38	0.113	0.113	NUM
fumecheng-7188	170	39	37	37	NUM
fumecheng-7188	170	40	5	5	NUM
fumecheng-7188	170	41	0.117	0.117	NUM
fumecheng-7188	170	42	48	48	NUM
fumecheng-7188	170	43	0.117	0.117	NUM
fumecheng-7188	170	44	46	46	NUM
fumecheng-7188	170	45	0.111	0.111	NUM
fumecheng-7188	170	46	41	41	NUM
fumecheng-7188	170	47	0.118	0.118	NUM
fumecheng-7188	170	48	38	38	NUM
fumecheng-7188	170	49	mean	mean	NOUN
fumecheng-7188	170	50	value	value	NOUN
fumecheng-7188	170	51	0.117	0.117	NUM
fumecheng-7188	170	52	48.6	48.6	NUM
fumecheng-7188	170	53	0.116	0.116	NUM
fumecheng-7188	170	54	46.0	46.0	NUM
fumecheng-7188	170	55	0.115	0.115	NUM
fumecheng-7188	170	56	41.0	41.0	NUM
fumecheng-7188	170	57	0.116	0.116	NUM
fumecheng-7188	170	58	37.6	37.6	NUM
fumecheng-7188	170	59	standard	standard	ADJ
fumecheng-7188	170	60	deviation	deviation	NOUN
fumecheng-7188	170	61	sn	sn	NOUN
fumecheng-7188	170	62	0.002	0.002	NUM
fumecheng-7188	170	63	1.140	1.140	NUM
fumecheng-7188	170	64	0.002	0.002	NUM
fumecheng-7188	170	65	0.000	0.000	NUM
fumecheng-7188	170	66	0.002	0.002	NUM
fumecheng-7188	170	67	0.707	0.707	NUM
fumecheng-7188	170	68	0.003	0.003	NUM
fumecheng-7188	170	69	0.548	0.548	NUM
fumecheng-7188	170	70	confidence	confidence	NOUN
fumecheng-7188	170	71	interval	interval	NOUN
fumecheng-7188	170	72	0.008	0.008	NUM
fumecheng-7188	170	73	5.25	5.25	NUM
fumecheng-7188	170	74	0.008	0.008	NUM
fumecheng-7188	170	75	0.000	0.000	NUM
fumecheng-7188	170	76	0.011	0.011	NUM
fumecheng-7188	170	77	3.26	3.26	NUM
fumecheng-7188	170	78	0.016	0.016	NUM
fumecheng-7188	170	79	2.52	2.52	NUM
fumecheng-7188	170	80	from	from	ADP
fumecheng-7188	170	81	the	the	DET
fumecheng-7188	170	82	above	above	ADJ
fumecheng-7188	170	83	results	result	NOUN
fumecheng-7188	170	84	,	,	PUNCT
fumecheng-7188	170	85	it	it	PRON
fumecheng-7188	170	86	can	can	AUX
fumecheng-7188	170	87	be	be	AUX
fumecheng-7188	170	88	seen	see	VERB
fumecheng-7188	170	89	that	that	SCONJ
fumecheng-7188	170	90	larger	large	ADJ
fumecheng-7188	170	91	permissible	permissible	ADJ
fumecheng-7188	170	92	probe	probe	NOUN
fumecheng-7188	170	93	deflection	deflection	NOUN
fumecheng-7188	170	94	pd	pd	PROPN
fumecheng-7188	170	95	enabled	enable	VERB
fumecheng-7188	170	96	22	22	NUM
fumecheng-7188	170	97	-	-	SYM
fumecheng-7188	170	98	28	28	NUM
fumecheng-7188	170	99	%	%	NOUN
fumecheng-7188	170	100	shortening	shortening	NOUN
fumecheng-7188	170	101	of	of	ADP
fumecheng-7188	170	102	the	the	DET
fumecheng-7188	170	103	measurement	measurement	NOUN
fumecheng-7188	170	104	time	time	NOUN
fumecheng-7188	170	105	at	at	ADP
fumecheng-7188	170	106	each	each	DET
fumecheng-7188	170	107	scanning	scan	VERB
fumecheng-7188	170	108	speed	speed	NOUN
fumecheng-7188	170	109	.	.	PUNCT
fumecheng-7188	171	1	however	however	ADV
fumecheng-7188	171	2	,	,	PUNCT
fumecheng-7188	171	3	it	it	PRON
fumecheng-7188	171	4	caused	cause	VERB
fumecheng-7188	171	5	distinguishable	distinguishable	ADJ
fumecheng-7188	171	6	1	1	NUM
fumecheng-7188	171	7	-	-	SYM
fumecheng-7188	171	8	6	6	NUM
fumecheng-7188	171	9	%	%	NOUN
fumecheng-7188	171	10	reduction	reduction	NOUN
fumecheng-7188	171	11	of	of	ADP
fumecheng-7188	171	12	the	the	DET
fumecheng-7188	171	13	obtained	obtain	VERB
fumecheng-7188	171	14	result	result	NOUN
fumecheng-7188	171	15	of	of	ADP
fumecheng-7188	171	16	form	form	NOUN
fumecheng-7188	171	17	error	error	NOUN
fumecheng-7188	171	18	δ	δ	PROPN
fumecheng-7188	171	19	.	.	PUNCT
fumecheng-7188	172	1	graph	graph	NOUN
fumecheng-7188	172	2	in	in	ADP
fumecheng-7188	172	3	fig.5	fig.5	NOUN
fumecheng-7188	172	4	shows	show	VERB
fumecheng-7188	172	5	how	how	SCONJ
fumecheng-7188	172	6	this	this	DET
fumecheng-7188	172	7	reduction	reduction	NOUN
fumecheng-7188	172	8	differs	differ	VERB
fumecheng-7188	172	9	for	for	ADP
fumecheng-7188	172	10	different	different	ADJ
fumecheng-7188	172	11	scanning	scanning	NOUN
fumecheng-7188	172	12	speed	speed	NOUN
fumecheng-7188	172	13	values	value	NOUN
fumecheng-7188	172	14	vs.	vs.	ADP
fumecheng-7188	172	15	from	from	ADP
fumecheng-7188	172	16	fig	fig	NOUN
fumecheng-7188	172	17	.	.	PUNCT
fumecheng-7188	173	1	5	5	NUM
fumecheng-7188	173	2	it	it	PRON
fumecheng-7188	173	3	can	can	AUX
fumecheng-7188	173	4	be	be	AUX
fumecheng-7188	173	5	concluded	conclude	VERB
fumecheng-7188	173	6	,	,	PUNCT
fumecheng-7188	173	7	that	that	SCONJ
fumecheng-7188	173	8	at	at	ADP
fumecheng-7188	173	9	higher	high	ADJ
fumecheng-7188	173	10	scanning	scanning	NOUN
fumecheng-7188	173	11	speeds	speed	NOUN
fumecheng-7188	173	12	,	,	PUNCT
fumecheng-7188	173	13	the	the	DET
fumecheng-7188	173	14	influence	influence	NOUN
fumecheng-7188	173	15	of	of	ADP
fumecheng-7188	173	16	probe	probe	NOUN
fumecheng-7188	173	17	deflection	deflection	NOUN
fumecheng-7188	173	18	is	be	AUX
fumecheng-7188	173	19	smaller	small	ADJ
fumecheng-7188	173	20	.	.	PUNCT
fumecheng-7188	174	1	for	for	ADP
fumecheng-7188	174	2	pd≤	pd≤	PROPN
fumecheng-7188	174	3	0.2	0.2	NUM
fumecheng-7188	174	4	mm	mm	NOUN
fumecheng-7188	174	5	,	,	PUNCT
fumecheng-7188	174	6	speed	speed	NOUN
fumecheng-7188	174	7	-	-	PUNCT
fumecheng-7188	174	8	dependent	dependent	ADJ
fumecheng-7188	174	9	differences	difference	NOUN
fumecheng-7188	174	10	in	in	ADP
fumecheng-7188	174	11	obtained	obtain	VERB
fumecheng-7188	174	12	form	form	NOUN
fumecheng-7188	174	13	deviations	deviation	NOUN
fumecheng-7188	174	14	δ	δ	PROPN
fumecheng-7188	174	15	lay	lie	VERB
fumecheng-7188	174	16	below	below	ADP
fumecheng-7188	174	17	e0,mpe	e0,mpe	PUNCT
fumecheng-7188	174	18	=	=	PRON
fumecheng-7188	174	19	(	(	PUNCT
fumecheng-7188	174	20	1.7	1.7	NUM
fumecheng-7188	174	21	+	+	NOUN
fumecheng-7188	174	22	3l/1000	3l/1000	NOUN
fumecheng-7188	174	23	)	)	PUNCT
fumecheng-7188	174	24	μm	μm	NOUN
fumecheng-7188	174	25	for	for	ADP
fumecheng-7188	174	26	the	the	DET
fumecheng-7188	174	27	used	use	VERB
fumecheng-7188	174	28	cmm	cmm	NOUN
fumecheng-7188	174	29	.	.	PUNCT
fumecheng-7188	175	1	notably	notably	ADV
fumecheng-7188	175	2	,	,	PUNCT
fumecheng-7188	175	3	this	this	DET
fumecheng-7188	175	4	range	range	NOUN
fumecheng-7188	175	5	of	of	ADP
fumecheng-7188	175	6	the	the	DET
fumecheng-7188	175	7	deflection	deflection	NOUN
fumecheng-7188	175	8	values	value	NOUN
fumecheng-7188	175	9	ensured	ensure	VERB
fumecheng-7188	175	10	insignificant	insignificant	ADJ
fumecheng-7188	175	11	effect	effect	NOUN
fumecheng-7188	175	12	of	of	ADP
fumecheng-7188	175	13	scanning	scan	VERB
fumecheng-7188	175	14	speed	speed	NOUN
fumecheng-7188	175	15	vs	vs	ADP
fumecheng-7188	175	16	on	on	ADP
fumecheng-7188	175	17	the	the	DET
fumecheng-7188	175	18	form	form	NOUN
fumecheng-7188	175	19	deviation	deviation	NOUN
fumecheng-7188	175	20	results	result	NOUN
fumecheng-7188	175	21	.	.	PUNCT
fumecheng-7188	176	1	for	for	ADP
fumecheng-7188	176	2	each	each	DET
fumecheng-7188	176	3	pd	pd	X
fumecheng-7188	176	4	=	=	PUNCT
fumecheng-7188	176	5	0.15	0.15	NUM
fumecheng-7188	176	6	and	and	CCONJ
fumecheng-7188	176	7	0.2	0.2	NUM
fumecheng-7188	176	8	mm	mm	NOUN
fumecheng-7188	176	9	,	,	PUNCT
fumecheng-7188	176	10	differences	difference	NOUN
fumecheng-7188	176	11	between	between	ADP
fumecheng-7188	176	12	obtained	obtain	VERB
fumecheng-7188	176	13	δ	δ	PROPN
fumecheng-7188	176	14	at	at	ADP
fumecheng-7188	176	15	various	various	ADJ
fumecheng-7188	176	16	vs	vs	ADP
fumecheng-7188	176	17	were	be	AUX
fumecheng-7188	176	18	1	1	NUM
fumecheng-7188	176	19	μm	μm	NOUN
fumecheng-7188	176	20	.	.	PUNCT
fumecheng-7188	177	1	larger	large	ADJ
fumecheng-7188	177	2	probe	probe	NOUN
fumecheng-7188	177	3	deflections	deflection	NOUN
fumecheng-7188	177	4	led	lead	VERB
fumecheng-7188	177	5	to	to	ADP
fumecheng-7188	177	6	widening	widen	VERB
fumecheng-7188	177	7	of	of	ADP
fumecheng-7188	177	8	the	the	DET
fumecheng-7188	177	9	results	result	NOUN
fumecheng-7188	177	10	span	span	NOUN
fumecheng-7188	177	11	,	,	PUNCT
fumecheng-7188	177	12	which	which	PRON
fumecheng-7188	177	13	indicated	indicate	VERB
fumecheng-7188	177	14	130	130	NUM
fumecheng-7188	177	15	t.	t.	NOUN
fumecheng-7188	177	16	mazur	mazur	PROPN
fumecheng-7188	177	17	,	,	PUNCT
fumecheng-7188	177	18	m.	m.	PROPN
fumecheng-7188	177	19	rucki	rucki	PROPN
fumecheng-7188	177	20	,	,	PUNCT
fumecheng-7188	177	21	y.	y.	PROPN
fumecheng-7188	177	22	gutsalenko	gutsalenko	PROPN
fumecheng-7188	177	23	increased	increase	VERB
fumecheng-7188	177	24	uncertainty	uncertainty	NOUN
fumecheng-7188	177	25	of	of	ADP
fumecheng-7188	177	26	the	the	DET
fumecheng-7188	177	27	measurement	measurement	NOUN
fumecheng-7188	177	28	.	.	PUNCT
fumecheng-7188	178	1	due	due	ADP
fumecheng-7188	178	2	to	to	ADP
fumecheng-7188	178	3	this	this	DET
fumecheng-7188	178	4	observation	observation	NOUN
fumecheng-7188	178	5	,	,	PUNCT
fumecheng-7188	178	6	we	we	PRON
fumecheng-7188	178	7	are	be	AUX
fumecheng-7188	178	8	against	against	ADP
fumecheng-7188	178	9	application	application	NOUN
fumecheng-7188	178	10	of	of	ADP
fumecheng-7188	178	11	pd	pd	PROPN
fumecheng-7188	178	12	>	>	X
fumecheng-7188	178	13	0.2	0.2	NUM
fumecheng-7188	178	14	mm	mm	NOUN
fumecheng-7188	178	15	for	for	ADP
fumecheng-7188	178	16	this	this	DET
fumecheng-7188	178	17	sort	sort	NOUN
fumecheng-7188	178	18	of	of	ADP
fumecheng-7188	178	19	measurement	measurement	NOUN
fumecheng-7188	178	20	.	.	PUNCT
fumecheng-7188	179	1	fig	fig	NOUN
fumecheng-7188	179	2	.	.	PUNCT
fumecheng-7188	180	1	5	5	NUM
fumecheng-7188	180	2	form	form	NOUN
fumecheng-7188	180	3	deviation	deviation	NOUN
fumecheng-7188	180	4	δ	δ	NOUN
fumecheng-7188	180	5	obtained	obtain	VERB
fumecheng-7188	180	6	at	at	ADP
fumecheng-7188	180	7	different	different	ADJ
fumecheng-7188	180	8	scanning	scanning	NOUN
fumecheng-7188	180	9	speeds	speed	NOUN
fumecheng-7188	180	10	vs	vs	ADP
fumecheng-7188	180	11	and	and	CCONJ
fumecheng-7188	180	12	different	different	ADJ
fumecheng-7188	180	13	probe	probe	NOUN
fumecheng-7188	180	14	deflections	deflection	NOUN
fumecheng-7188	180	15	pd	pd	PROPN
fumecheng-7188	180	16	calculations	calculation	NOUN
fumecheng-7188	180	17	of	of	ADP
fumecheng-7188	180	18	true	true	ADJ
fumecheng-7188	180	19	scanning	scanning	NOUN
fumecheng-7188	180	20	velocity	velocity	NOUN
fumecheng-7188	180	21	vs	vs	AUX
fumecheng-7188	180	22	'	'	PUNCT
fumecheng-7188	180	23	revealed	reveal	VERB
fumecheng-7188	180	24	substantial	substantial	ADJ
fumecheng-7188	180	25	differences	difference	NOUN
fumecheng-7188	180	26	between	between	ADP
fumecheng-7188	180	27	them	they	PRON
fumecheng-7188	180	28	and	and	CCONJ
fumecheng-7188	180	29	set	set	VERB
fumecheng-7188	180	30	values	value	NOUN
fumecheng-7188	180	31	vs.	vs.	ADP
fumecheng-7188	180	32	values	value	NOUN
fumecheng-7188	180	33	of	of	ADP
fumecheng-7188	180	34	vs	vs	NOUN
fumecheng-7188	180	35	'	'	PUNCT
fumecheng-7188	180	36	were	be	AUX
fumecheng-7188	180	37	determined	determine	VERB
fumecheng-7188	180	38	from	from	ADP
fumecheng-7188	180	39	the	the	DET
fumecheng-7188	180	40	known	know	VERB
fumecheng-7188	180	41	length	length	NOUN
fumecheng-7188	180	42	of	of	ADP
fumecheng-7188	180	43	measured	measure	VERB
fumecheng-7188	180	44	contour	contour	NOUN
fumecheng-7188	180	45	lc	lc	NOUN
fumecheng-7188	180	46	and	and	CCONJ
fumecheng-7188	180	47	automatically	automatically	ADV
fumecheng-7188	180	48	registered	register	VERB
fumecheng-7188	180	49	time	time	NOUN
fumecheng-7188	180	50	of	of	ADP
fumecheng-7188	180	51	each	each	DET
fumecheng-7188	180	52	measurement	measurement	NOUN
fumecheng-7188	180	53	.	.	PUNCT
fumecheng-7188	181	1	table	table	NOUN
fumecheng-7188	181	2	6	6	NUM
fumecheng-7188	181	3	presents	present	VERB
fumecheng-7188	181	4	the	the	DET
fumecheng-7188	181	5	values	value	NOUN
fumecheng-7188	181	6	and	and	CCONJ
fumecheng-7188	181	7	percentage	percentage	NOUN
fumecheng-7188	181	8	differences	difference	NOUN
fumecheng-7188	181	9	between	between	ADP
fumecheng-7188	181	10	them	they	PRON
fumecheng-7188	181	11	.	.	PUNCT
fumecheng-7188	182	1	table	table	NOUN
fumecheng-7188	182	2	6	6	NUM
fumecheng-7188	182	3	true	true	ADJ
fumecheng-7188	182	4	values	value	NOUN
fumecheng-7188	182	5	of	of	ADP
fumecheng-7188	182	6	scanning	scan	VERB
fumecheng-7188	182	7	speed	speed	NOUN
fumecheng-7188	182	8	vs	vs	ADP
fumecheng-7188	182	9	'	'	PUNCT
fumecheng-7188	182	10	related	relate	VERB
fumecheng-7188	182	11	to	to	ADP
fumecheng-7188	182	12	the	the	DET
fumecheng-7188	182	13	nominal	nominal	ADJ
fumecheng-7188	182	14	ones	one	NOUN
fumecheng-7188	182	15	vs	vs	ADP
fumecheng-7188	182	16	for	for	ADP
fumecheng-7188	182	17	different	different	ADJ
fumecheng-7188	182	18	probe	probe	NOUN
fumecheng-7188	182	19	deflections	deflection	NOUN
fumecheng-7188	182	20	pd	pd	PROPN
fumecheng-7188	182	21	(	(	PUNCT
fumecheng-7188	182	22	sampling	sample	VERB
fumecheng-7188	182	23	step	step	NOUN
fumecheng-7188	182	24	was	be	AUX
fumecheng-7188	182	25	0.2	0.2	NUM
fumecheng-7188	182	26	mm	mm	NOUN
fumecheng-7188	182	27	)	)	PUNCT
fumecheng-7188	183	1	pd=	pd=	NOUN
fumecheng-7188	183	2	0.15	0.15	NUM
fumecheng-7188	183	3	mm	mm	INTJ
fumecheng-7188	183	4	pd=	pd=	ADJ
fumecheng-7188	183	5	0.2	0.2	NUM
fumecheng-7188	183	6	mm	mm	INTJ
fumecheng-7188	184	1	pd=	pd=	ADJ
fumecheng-7188	184	2	0.3	0.3	NUM
fumecheng-7188	184	3	mm	mm	NOUN
fumecheng-7188	184	4	pd=	pd=	PROPN
fumecheng-7188	184	5	0.4	0.4	NUM
fumecheng-7188	184	6	mm	mm	NOUN
fumecheng-7188	184	7	vs	vs	ADP
fumecheng-7188	184	8	[	[	X
fumecheng-7188	184	9	mm	mm	PROPN
fumecheng-7188	184	10	/	/	SYM
fumecheng-7188	184	11	s	s	PROPN
fumecheng-7188	184	12	]	]	X
fumecheng-7188	184	13	vs	vs	ADP
fumecheng-7188	184	14	'	'	PUNCT
fumecheng-7188	184	15	[	[	X
fumecheng-7188	184	16	mm	mm	X
fumecheng-7188	184	17	/	/	SYM
fumecheng-7188	184	18	s	s	PROPN
fumecheng-7188	184	19	]	]	X
fumecheng-7188	184	20	percen	percen	NOUN
fumecheng-7188	184	21	tage	tage	NOUN
fumecheng-7188	184	22	vs	vs	ADP
fumecheng-7188	184	23	'	'	PUNCT
fumecheng-7188	184	24	[	[	X
fumecheng-7188	184	25	mm	mm	X
fumecheng-7188	184	26	/	/	SYM
fumecheng-7188	184	27	s	s	PROPN
fumecheng-7188	184	28	]	]	X
fumecheng-7188	184	29	percen	percen	NOUN
fumecheng-7188	184	30	tage	tage	NOUN
fumecheng-7188	184	31	vs	vs	ADP
fumecheng-7188	184	32	'	'	PUNCT
fumecheng-7188	184	33	[	[	X
fumecheng-7188	184	34	mm	mm	X
fumecheng-7188	184	35	/	/	SYM
fumecheng-7188	184	36	s	s	PROPN
fumecheng-7188	184	37	]	]	X
fumecheng-7188	184	38	percen	percen	NOUN
fumecheng-7188	184	39	tage	tage	NOUN
fumecheng-7188	184	40	vs	vs	ADP
fumecheng-7188	184	41	'	'	PUNCT
fumecheng-7188	184	42	[	[	X
fumecheng-7188	184	43	mm	mm	X
fumecheng-7188	184	44	/	/	SYM
fumecheng-7188	184	45	s	s	PROPN
fumecheng-7188	184	46	]	]	X
fumecheng-7188	184	47	percen	percen	NOUN
fumecheng-7188	184	48	tage	tage	NOUN
fumecheng-7188	184	49	1	1	NUM
fumecheng-7188	184	50	0.120	0.120	NUM
fumecheng-7188	184	51	50	50	NUM
fumecheng-7188	184	52	0.113	0.113	NUM
fumecheng-7188	184	53	46	46	NUM
fumecheng-7188	184	54	0.115	0.115	NUM
fumecheng-7188	184	55	42	42	NUM
fumecheng-7188	184	56	0.121	0.121	NUM
fumecheng-7188	184	57	38	38	NUM
fumecheng-7188	184	58	2	2	NUM
fumecheng-7188	184	59	0.118	0.118	NUM
fumecheng-7188	184	60	49	49	NUM
fumecheng-7188	184	61	0.115	0.115	NUM
fumecheng-7188	184	62	46	46	NUM
fumecheng-7188	184	63	0.117	0.117	NUM
fumecheng-7188	184	64	40	40	NUM
fumecheng-7188	184	65	0.114	0.114	NUM
fumecheng-7188	184	66	38	38	NUM
fumecheng-7188	184	67	3	3	NUM
fumecheng-7188	184	68	0.117	0.117	NUM
fumecheng-7188	184	69	49	49	NUM
fumecheng-7188	184	70	0.117	0.117	NUM
fumecheng-7188	184	71	46	46	NUM
fumecheng-7188	184	72	0.115	0.115	NUM
fumecheng-7188	184	73	41	41	NUM
fumecheng-7188	184	74	0.114	0.114	NUM
fumecheng-7188	184	75	37	37	NUM
fumecheng-7188	184	76	4	4	NUM
fumecheng-7188	184	77	0.008	0.008	NUM
fumecheng-7188	184	78	5.25	5.25	NUM
fumecheng-7188	184	79	0.008	0.008	NUM
fumecheng-7188	184	80	0.000	0.000	NUM
fumecheng-7188	184	81	0.011	0.011	NUM
fumecheng-7188	184	82	3.26	3.26	NUM
fumecheng-7188	184	83	0.016	0.016	NUM
fumecheng-7188	184	84	2.52	2.52	NUM
fumecheng-7188	185	1	it	it	PRON
fumecheng-7188	185	2	should	should	AUX
fumecheng-7188	185	3	be	be	AUX
fumecheng-7188	185	4	noted	note	VERB
fumecheng-7188	185	5	that	that	SCONJ
fumecheng-7188	185	6	the	the	DET
fumecheng-7188	185	7	true	true	ADJ
fumecheng-7188	185	8	scanning	scanning	NOUN
fumecheng-7188	185	9	speed	speed	NOUN
fumecheng-7188	185	10	never	never	ADV
fumecheng-7188	185	11	reached	reach	VERB
fumecheng-7188	185	12	its	its	PRON
fumecheng-7188	185	13	nominal	nominal	ADJ
fumecheng-7188	185	14	value	value	NOUN
fumecheng-7188	185	15	,	,	PUNCT
fumecheng-7188	185	16	and	and	CCONJ
fumecheng-7188	185	17	smaller	small	ADJ
fumecheng-7188	185	18	probe	probe	NOUN
fumecheng-7188	185	19	deflections	deflection	NOUN
fumecheng-7188	185	20	reduced	reduce	VERB
fumecheng-7188	185	21	its	its	PRON
fumecheng-7188	185	22	value	value	NOUN
fumecheng-7188	185	23	by	by	ADP
fumecheng-7188	185	24	almost	almost	ADV
fumecheng-7188	185	25	40	40	NUM
fumecheng-7188	185	26	%	%	NOUN
fumecheng-7188	185	27	.	.	PUNCT
fumecheng-7188	186	1	considering	consider	VERB
fumecheng-7188	186	2	previous	previous	ADJ
fumecheng-7188	186	3	conclusion	conclusion	NOUN
fumecheng-7188	186	4	that	that	SCONJ
fumecheng-7188	186	5	the	the	DET
fumecheng-7188	186	6	measurement	measurement	NOUN
fumecheng-7188	186	7	should	should	AUX
fumecheng-7188	186	8	not	not	PART
fumecheng-7188	186	9	be	be	AUX
fumecheng-7188	186	10	performed	perform	VERB
fumecheng-7188	186	11	with	with	ADP
fumecheng-7188	186	12	pd	pd	PROPN
fumecheng-7188	186	13	>	>	X
fumecheng-7188	186	14	0.2	0.2	NUM
fumecheng-7188	186	15	mm	mm	NOUN
fumecheng-7188	186	16	,	,	PUNCT
fumecheng-7188	186	17	this	this	DET
fumecheng-7188	186	18	finding	finding	NOUN
fumecheng-7188	186	19	becomes	become	VERB
fumecheng-7188	186	20	extremely	extremely	ADV
fumecheng-7188	186	21	important	important	ADJ
fumecheng-7188	186	22	.	.	PUNCT
fumecheng-7188	187	1	in	in	ADP
fumecheng-7188	187	2	the	the	DET
fumecheng-7188	187	3	case	case	NOUN
fumecheng-7188	187	4	of	of	ADP
fumecheng-7188	187	5	100	100	NUM
fumecheng-7188	187	6	%	%	NOUN
fumecheng-7188	187	7	inspection	inspection	NOUN
fumecheng-7188	187	8	of	of	ADP
fumecheng-7188	187	9	large	large	ADJ
fumecheng-7188	187	10	lots	lot	NOUN
fumecheng-7188	187	11	of	of	ADP
fumecheng-7188	187	12	the	the	DET
fumecheng-7188	187	13	cams	cam	NOUN
fumecheng-7188	187	14	similar	similar	ADJ
fumecheng-7188	187	15	to	to	ADP
fumecheng-7188	187	16	the	the	DET
fumecheng-7188	187	17	one	one	NOUN
fumecheng-7188	187	18	investigated	investigate	VERB
fumecheng-7188	187	19	,	,	PUNCT
fumecheng-7188	187	20	measurements	measurement	NOUN
fumecheng-7188	187	21	will	will	AUX
fumecheng-7188	187	22	take	take	VERB
fumecheng-7188	187	23	30	30	NUM
fumecheng-7188	187	24	-	-	SYM
fumecheng-7188	187	25	40	40	NUM
fumecheng-7188	187	26	%	%	NOUN
fumecheng-7188	187	27	longer	long	ADJ
fumecheng-7188	187	28	time	time	NOUN
fumecheng-7188	187	29	than	than	SCONJ
fumecheng-7188	187	30	it	it	PRON
fumecheng-7188	187	31	would	would	AUX
fumecheng-7188	187	32	be	be	AUX
fumecheng-7188	187	33	expected	expect	VERB
fumecheng-7188	187	34	from	from	ADP
fumecheng-7188	187	35	the	the	DET
fumecheng-7188	187	36	nominal	nominal	ADJ
fumecheng-7188	187	37	scanning	scanning	NOUN
fumecheng-7188	187	38	speed	speed	NOUN
fumecheng-7188	187	39	.	.	PUNCT
fumecheng-7188	188	1	in	in	ADP
fumecheng-7188	188	2	the	the	DET
fumecheng-7188	188	3	flexible	flexible	ADJ
fumecheng-7188	188	4	manufacturing	manufacturing	NOUN
fumecheng-7188	188	5	systems	system	NOUN
fumecheng-7188	188	6	working	work	VERB
fumecheng-7188	188	7	in	in	ADP
fumecheng-7188	188	8	the	the	DET
fumecheng-7188	188	9	frames	frame	NOUN
fumecheng-7188	188	10	of	of	ADP
fumecheng-7188	188	11	industry	industry	NOUN
fumecheng-7188	188	12	4.0	4.0	NUM
fumecheng-7188	188	13	concept	concept	NOUN
fumecheng-7188	188	14	[	[	X
fumecheng-7188	188	15	32	32	NUM
fumecheng-7188	188	16	]	]	PUNCT
fumecheng-7188	188	17	,	,	PUNCT
fumecheng-7188	188	18	prolonged	prolonged	ADJ
fumecheng-7188	188	19	inspection	inspection	NOUN
fumecheng-7188	188	20	time	time	NOUN
fumecheng-7188	188	21	may	may	AUX
fumecheng-7188	188	22	become	become	VERB
fumecheng-7188	188	23	an	an	DET
fumecheng-7188	188	24	issue	issue	NOUN
fumecheng-7188	188	25	.	.	PUNCT
fumecheng-7188	189	1	4.2	4.2	NUM
fumecheng-7188	189	2	.	.	PUNCT
fumecheng-7188	189	3	results	result	NOUN
fumecheng-7188	189	4	of	of	ADP
fumecheng-7188	189	5	uncertainty	uncertainty	NOUN
fumecheng-7188	189	6	evaluation	evaluation	NOUN
fumecheng-7188	189	7	in	in	ADP
fumecheng-7188	189	8	the	the	DET
fumecheng-7188	189	9	type	type	NOUN
fumecheng-7188	189	10	a	a	DET
fumecheng-7188	189	11	uncertainty	uncertainty	NOUN
fumecheng-7188	189	12	evaluation	evaluation	NOUN
fumecheng-7188	189	13	,	,	PUNCT
fumecheng-7188	189	14	three	three	NUM
fumecheng-7188	189	15	series	series	NOUN
fumecheng-7188	189	16	of	of	ADP
fumecheng-7188	189	17	the	the	DET
fumecheng-7188	189	18	measurement	measurement	NOUN
fumecheng-7188	189	19	results	result	NOUN
fumecheng-7188	189	20	were	be	AUX
fumecheng-7188	189	21	used	use	VERB
fumecheng-7188	189	22	,	,	PUNCT
fumecheng-7188	189	23	50	50	NUM
fumecheng-7188	189	24	repetitions	repetition	NOUN
fumecheng-7188	189	25	each	each	PRON
fumecheng-7188	189	26	.	.	PUNCT
fumecheng-7188	190	1	it	it	PRON
fumecheng-7188	190	2	can	can	AUX
fumecheng-7188	190	3	be	be	AUX
fumecheng-7188	190	4	assumed	assume	VERB
fumecheng-7188	190	5	that	that	SCONJ
fumecheng-7188	190	6	the	the	DET
fumecheng-7188	190	7	standard	standard	ADJ
fumecheng-7188	190	8	uncertainty	uncertainty	NOUN
fumecheng-7188	190	9	is	be	AUX
fumecheng-7188	190	10	approximately	approximately	ADV
fumecheng-7188	190	11	equal	equal	ADJ
fumecheng-7188	190	12	to	to	ADP
fumecheng-7188	190	13	the	the	DET
fumecheng-7188	190	14	standard	standard	ADJ
fumecheng-7188	190	15	deviation	deviation	NOUN
fumecheng-7188	190	16	u(x	u(x	NOUN
fumecheng-7188	190	17	)	)	PUNCT
fumecheng-7188	190	18	≈sn	≈sn	NOUN
fumecheng-7188	190	19	,	,	PUNCT
fumecheng-7188	190	20	and	and	CCONJ
fumecheng-7188	190	21	the	the	DET
fumecheng-7188	190	22	coverage	coverage	NOUN
fumecheng-7188	190	23	factor	factor	NOUN
fumecheng-7188	190	24	for	for	ADP
fumecheng-7188	190	25	the	the	DET
fumecheng-7188	190	26	level	level	NOUN
fumecheng-7188	190	27	of	of	ADP
fumecheng-7188	190	28	confidence	confidence	NOUN
fumecheng-7188	190	29	p	p	NOUN
fumecheng-7188	190	30	=	=	SYM
fumecheng-7188	190	31	99	99	NUM
fumecheng-7188	190	32	%	%	NOUN
fumecheng-7188	190	33	can	can	AUX
fumecheng-7188	190	34	be	be	AUX
fumecheng-7188	190	35	kp	kp	PROPN
fumecheng-7188	190	36	=	=	NOUN
fumecheng-7188	190	37	2.576	2.576	NUM
fumecheng-7188	191	1	[	[	X
fumecheng-7188	191	2	28	28	NUM
fumecheng-7188	191	3	]	]	PUNCT
fumecheng-7188	191	4	.	.	PUNCT
fumecheng-7188	192	1	as	as	SCONJ
fumecheng-7188	192	2	described	describe	VERB
fumecheng-7188	192	3	above	above	ADV
fumecheng-7188	192	4	,	,	PUNCT
fumecheng-7188	192	5	series	series	NOUN
fumecheng-7188	192	6	no	no	NOUN
fumecheng-7188	192	7	.	.	PROPN
fumecheng-7188	192	8	9	9	NUM
fumecheng-7188	192	9	followed	follow	VERB
fumecheng-7188	192	10	repeatability	repeatability	NOUN
fumecheng-7188	192	11	accuracy	accuracy	NOUN
fumecheng-7188	192	12	analysis	analysis	NOUN
fumecheng-7188	192	13	of	of	ADP
fumecheng-7188	192	14	the	the	DET
fumecheng-7188	192	15	curved	curved	ADJ
fumecheng-7188	192	16	profile	profile	PROPN
fumecheng-7188	192	17	measurement	measurement	NOUN
fumecheng-7188	192	18	with	with	ADP
fumecheng-7188	192	19	cmm	cmm	NOUN
fumecheng-7188	192	20	:	:	PUNCT
fumecheng-7188	192	21	a	a	DET
fumecheng-7188	192	22	case	case	NOUN
fumecheng-7188	192	23	study	study	VERB
fumecheng-7188	192	24	131	131	NUM
fumecheng-7188	192	25	conditions	condition	NOUN
fumecheng-7188	192	26	,	,	PUNCT
fumecheng-7188	192	27	but	but	CCONJ
fumecheng-7188	192	28	not	not	PART
fumecheng-7188	192	29	as	as	ADV
fumecheng-7188	192	30	strictly	strictly	ADV
fumecheng-7188	192	31	as	as	ADP
fumecheng-7188	192	32	series	series	NOUN
fumecheng-7188	192	33	no	no	PROPN
fumecheng-7188	192	34	.	.	PROPN
fumecheng-7188	192	35	17	17	NUM
fumecheng-7188	192	36	.	.	PUNCT
fumecheng-7188	193	1	on	on	ADP
fumecheng-7188	193	2	the	the	DET
fumecheng-7188	193	3	other	other	ADJ
fumecheng-7188	193	4	hand	hand	NOUN
fumecheng-7188	193	5	,	,	PUNCT
fumecheng-7188	193	6	series	series	NOUN
fumecheng-7188	193	7	no	no	PROPN
fumecheng-7188	193	8	.	.	PROPN
fumecheng-7188	193	9	18	18	NUM
fumecheng-7188	193	10	had	have	VERB
fumecheng-7188	193	11	a	a	DET
fumecheng-7188	193	12	larger	large	ADJ
fumecheng-7188	193	13	number	number	NOUN
fumecheng-7188	193	14	of	of	ADP
fumecheng-7188	193	15	probing	probe	VERB
fumecheng-7188	193	16	points	point	NOUN
fumecheng-7188	193	17	,	,	PUNCT
fumecheng-7188	193	18	close	close	ADJ
fumecheng-7188	193	19	to	to	ADP
fumecheng-7188	193	20	that	that	PRON
fumecheng-7188	193	21	of	of	ADP
fumecheng-7188	193	22	the	the	DET
fumecheng-7188	193	23	reference	reference	NOUN
fumecheng-7188	193	24	file	file	NOUN
fumecheng-7188	193	25	derived	derive	VERB
fumecheng-7188	193	26	from	from	ADP
fumecheng-7188	193	27	the	the	DET
fumecheng-7188	193	28	technical	technical	ADJ
fumecheng-7188	193	29	drawing	drawing	NOUN
fumecheng-7188	193	30	.	.	PUNCT
fumecheng-7188	194	1	table	table	NOUN
fumecheng-7188	194	2	7	7	NUM
fumecheng-7188	194	3	presents	present	NOUN
fumecheng-7188	194	4	values	value	NOUN
fumecheng-7188	194	5	of	of	ADP
fumecheng-7188	194	6	the	the	DET
fumecheng-7188	194	7	calculated	calculated	ADJ
fumecheng-7188	194	8	standard	standard	ADJ
fumecheng-7188	194	9	and	and	CCONJ
fumecheng-7188	194	10	expanded	expand	VERB
fumecheng-7188	194	11	uncertainties	uncertainty	NOUN
fumecheng-7188	194	12	.	.	PUNCT
fumecheng-7188	195	1	examples	example	NOUN
fumecheng-7188	195	2	of	of	ADP
fumecheng-7188	195	3	the	the	DET
fumecheng-7188	195	4	measured	measured	ADJ
fumecheng-7188	195	5	profiles	profile	NOUN
fumecheng-7188	195	6	with	with	ADP
fumecheng-7188	195	7	emphasized	emphasize	VERB
fumecheng-7188	195	8	δmax	δmax	NOUN
fumecheng-7188	195	9	are	be	AUX
fumecheng-7188	195	10	shown	show	VERB
fumecheng-7188	195	11	in	in	ADP
fumecheng-7188	195	12	figs	fig	NOUN
fumecheng-7188	195	13	6	6	NUM
fumecheng-7188	195	14	and	and	CCONJ
fumecheng-7188	195	15	7	7	NUM
fumecheng-7188	195	16	.	.	NOUN
fumecheng-7188	195	17	table	table	NOUN
fumecheng-7188	195	18	7	7	NUM
fumecheng-7188	195	19	uncertainty	uncertainty	NOUN
fumecheng-7188	195	20	estimation	estimation	NOUN
fumecheng-7188	195	21	based	base	VERB
fumecheng-7188	195	22	on	on	ADP
fumecheng-7188	195	23	the	the	DET
fumecheng-7188	195	24	series	series	NOUN
fumecheng-7188	195	25	with	with	ADP
fumecheng-7188	195	26	50	50	NUM
fumecheng-7188	195	27	repetitions	repetition	NOUN
fumecheng-7188	195	28	series	series	NOUN
fumecheng-7188	195	29	no	no	NOUN
fumecheng-7188	195	30	.	.	NOUN
fumecheng-7188	195	31	9	9	NUM
fumecheng-7188	195	32	17	17	NUM
fumecheng-7188	195	33	18	18	NUM
fumecheng-7188	195	34			NUM
fumecheng-7188	195	35	[	[	X
fumecheng-7188	195	36	mm	mm	X
fumecheng-7188	195	37	]	]	X
fumecheng-7188	195	38	0.1151	0.1151	NUM
fumecheng-7188	195	39	0.1137	0.1137	NUM
fumecheng-7188	195	40	0.1152	0.1152	NUM
fumecheng-7188	195	41	sn	sn	PROPN
fumecheng-7188	195	42	≈	≈	PROPN
fumecheng-7188	195	43	u(x	u(x	PROPN
fumecheng-7188	195	44	)	)	PUNCT
fumecheng-7188	195	45	0.00158	0.00158	NUM
fumecheng-7188	195	46	0.00195	0.00195	NUM
fumecheng-7188	195	47	0.00142	0.00142	NUM
fumecheng-7188	195	48	u0.99	u0.99	NOUN
fumecheng-7188	195	49	=	=	PUNCT
fumecheng-7188	195	50	kp×	kp×	X
fumecheng-7188	195	51	u(x	u(x	PROPN
fumecheng-7188	195	52	)	)	PUNCT
fumecheng-7188	195	53	0.004	0.004	NUM
fumecheng-7188	195	54	0.005	0.005	NUM
fumecheng-7188	195	55	0.004	0.004	NUM
fumecheng-7188	195	56	fig	fig	NOUN
fumecheng-7188	195	57	.	.	PUNCT
fumecheng-7188	196	1	6	6	NUM
fumecheng-7188	196	2	example	example	NOUN
fumecheng-7188	196	3	of	of	ADP
fumecheng-7188	196	4	the	the	DET
fumecheng-7188	196	5	measured	measure	VERB
fumecheng-7188	196	6	profile	profile	NOUN
fumecheng-7188	196	7	with	with	ADP
fumecheng-7188	196	8	the	the	DET
fumecheng-7188	196	9	result	result	NOUN
fumecheng-7188	196	10	of	of	ADP
fumecheng-7188	196	11	δ	δ	PROPN
fumecheng-7188	196	12	=	=	PUNCT
fumecheng-7188	196	13	0.113	0.113	NUM
fumecheng-7188	196	14	mm	mm	NOUN
fumecheng-7188	196	15	;	;	PUNCT
fumecheng-7188	196	16	sampling	sample	VERB
fumecheng-7188	196	17	step	step	NOUN
fumecheng-7188	196	18	s	s	PART
fumecheng-7188	196	19	=	=	NOUN
fumecheng-7188	196	20	0.2	0.2	NUM
fumecheng-7188	196	21	mm	mm	NOUN
fumecheng-7188	196	22	,	,	PUNCT
fumecheng-7188	196	23	660	660	NUM
fumecheng-7188	196	24	probing	probe	VERB
fumecheng-7188	196	25	points	point	NOUN
fumecheng-7188	196	26	the	the	DET
fumecheng-7188	196	27	results	result	NOUN
fumecheng-7188	196	28	presented	present	VERB
fumecheng-7188	196	29	in	in	ADP
fumecheng-7188	196	30	table	table	NOUN
fumecheng-7188	196	31	7	7	NUM
fumecheng-7188	196	32	appear	appear	VERB
fumecheng-7188	196	33	a	a	DET
fumecheng-7188	196	34	little	little	ADJ
fumecheng-7188	196	35	unexpected	unexpected	ADJ
fumecheng-7188	196	36	.	.	PUNCT
fumecheng-7188	197	1	a	a	DET
fumecheng-7188	197	2	higher	high	ADJ
fumecheng-7188	197	3	degree	degree	NOUN
fumecheng-7188	197	4	of	of	ADP
fumecheng-7188	197	5	conformity	conformity	NOUN
fumecheng-7188	197	6	is	be	AUX
fumecheng-7188	197	7	between	between	ADP
fumecheng-7188	197	8	series	series	PROPN
fumecheng-7188	197	9	no	no	PROPN
fumecheng-7188	197	10	.	.	PROPN
fumecheng-7188	197	11	9	9	NUM
fumecheng-7188	197	12	and	and	CCONJ
fumecheng-7188	197	13	18	18	NUM
fumecheng-7188	197	14	than	than	ADP
fumecheng-7188	197	15	between	between	ADP
fumecheng-7188	197	16	no	no	NOUN
fumecheng-7188	197	17	.	.	NOUN
fumecheng-7188	197	18	17	17	NUM
fumecheng-7188	197	19	and	and	CCONJ
fumecheng-7188	197	20	any	any	PRON
fumecheng-7188	197	21	of	of	ADP
fumecheng-7188	197	22	two	two	NUM
fumecheng-7188	197	23	others	other	NOUN
fumecheng-7188	197	24	,	,	PUNCT
fumecheng-7188	197	25	despite	despite	SCONJ
fumecheng-7188	197	26	its	its	PRON
fumecheng-7188	197	27	conditions	condition	NOUN
fumecheng-7188	197	28	were	be	AUX
fumecheng-7188	197	29	“	"	PUNCT
fumecheng-7188	197	30	in	in	ADP
fumecheng-7188	197	31	-	-	PUNCT
fumecheng-7188	197	32	between	between	NOUN
fumecheng-7188	197	33	”	"	PUNCT
fumecheng-7188	197	34	(	(	PUNCT
fumecheng-7188	197	35	same	same	ADJ
fumecheng-7188	197	36	number	number	NOUN
fumecheng-7188	197	37	of	of	ADP
fumecheng-7188	197	38	probing	probe	VERB
fumecheng-7188	197	39	points	point	NOUN
fumecheng-7188	197	40	as	as	ADP
fumecheng-7188	197	41	no	no	NOUN
fumecheng-7188	197	42	.	.	NOUN
fumecheng-7188	197	43	9	9	NUM
fumecheng-7188	197	44	and	and	CCONJ
fumecheng-7188	197	45	time	time	NOUN
fumecheng-7188	197	46	of	of	ADP
fumecheng-7188	197	47	experiment	experiment	NOUN
fumecheng-7188	197	48	closer	close	ADV
fumecheng-7188	197	49	to	to	ADP
fumecheng-7188	197	50	no	no	NOUN
fumecheng-7188	197	51	.	.	NOUN
fumecheng-7188	197	52	18	18	NUM
fumecheng-7188	197	53	)	)	PUNCT
fumecheng-7188	197	54	.	.	PUNCT
fumecheng-7188	198	1	nevertheless	nevertheless	ADV
fumecheng-7188	198	2	,	,	PUNCT
fumecheng-7188	198	3	it	it	PRON
fumecheng-7188	198	4	should	should	AUX
fumecheng-7188	198	5	be	be	AUX
fumecheng-7188	198	6	kept	keep	VERB
fumecheng-7188	198	7	in	in	ADP
fumecheng-7188	198	8	mind	mind	NOUN
fumecheng-7188	198	9	that	that	SCONJ
fumecheng-7188	198	10	the	the	DET
fumecheng-7188	198	11	differences	difference	NOUN
fumecheng-7188	198	12	between	between	ADP
fumecheng-7188	198	13	both	both	PRON
fumecheng-7188	198	14	mean	mean	ADJ
fumecheng-7188	198	15	values	value	NOUN
fumecheng-7188	198	16			NUM
fumecheng-7188	198	17	and	and	CCONJ
fumecheng-7188	198	18	expanded	expand	VERB
fumecheng-7188	198	19	uncertainties	uncertainty	NOUN
fumecheng-7188	198	20	u0.99	u0.99	PROPN
fumecheng-7188	198	21	for	for	ADP
fumecheng-7188	198	22	three	three	NUM
fumecheng-7188	198	23	series	series	NOUN
fumecheng-7188	198	24	lay	lie	VERB
fumecheng-7188	198	25	below	below	ADP
fumecheng-7188	198	26	e0,mpe	e0,mpe	PRON
fumecheng-7188	198	27	.	.	PUNCT
fumecheng-7188	199	1	hence	hence	ADV
fumecheng-7188	199	2	,	,	PUNCT
fumecheng-7188	199	3	it	it	PRON
fumecheng-7188	199	4	may	may	AUX
fumecheng-7188	199	5	be	be	AUX
fumecheng-7188	199	6	stated	state	VERB
fumecheng-7188	199	7	that	that	SCONJ
fumecheng-7188	199	8	the	the	DET
fumecheng-7188	199	9	influence	influence	NOUN
fumecheng-7188	199	10	of	of	ADP
fumecheng-7188	199	11	sampling	sampling	NOUN
fumecheng-7188	199	12	is	be	AUX
fumecheng-7188	199	13	negligibly	negligibly	ADV
fumecheng-7188	199	14	small	small	ADJ
fumecheng-7188	199	15	when	when	SCONJ
fumecheng-7188	199	16	estimating	estimate	VERB
fumecheng-7188	199	17	the	the	DET
fumecheng-7188	199	18	measurement	measurement	NOUN
fumecheng-7188	199	19	uncertainty	uncertainty	NOUN
fumecheng-7188	199	20	of	of	ADP
fumecheng-7188	199	21	cmm	cmm	PROPN
fumecheng-7188	199	22	measurement	measurement	NOUN
fumecheng-7188	199	23	of	of	ADP
fumecheng-7188	199	24	the	the	DET
fumecheng-7188	199	25	cam	cam	NOUN
fumecheng-7188	199	26	profile	profile	NOUN
fumecheng-7188	199	27	.	.	PUNCT
fumecheng-7188	200	1	132	132	NUM
fumecheng-7188	200	2	t.	t.	PROPN
fumecheng-7188	200	3	mazur	mazur	PROPN
fumecheng-7188	200	4	,	,	PUNCT
fumecheng-7188	200	5	m.	m.	PROPN
fumecheng-7188	200	6	rucki	rucki	PROPN
fumecheng-7188	200	7	,	,	PUNCT
fumecheng-7188	200	8	y.	y.	PROPN
fumecheng-7188	200	9	gutsalenko	gutsalenko	PROPN
fumecheng-7188	200	10	fig	fig	NOUN
fumecheng-7188	200	11	.	.	PUNCT
fumecheng-7188	201	1	7	7	NUM
fumecheng-7188	201	2	view	view	NOUN
fumecheng-7188	201	3	of	of	ADP
fumecheng-7188	201	4	the	the	DET
fumecheng-7188	201	5	area	area	NOUN
fumecheng-7188	201	6	with	with	ADP
fumecheng-7188	201	7	the	the	DET
fumecheng-7188	201	8	largest	large	ADJ
fumecheng-7188	201	9	identified	identify	VERB
fumecheng-7188	201	10	form	form	NOUN
fumecheng-7188	201	11	deviation	deviation	NOUN
fumecheng-7188	201	12	:	:	PUNCT
fumecheng-7188	201	13	a	a	X
fumecheng-7188	201	14	)	)	PUNCT
fumecheng-7188	201	15	δmax	δmax	NOUN
fumecheng-7188	201	16	=	=	PUNCT
fumecheng-7188	201	17	0.113	0.113	NUM
fumecheng-7188	201	18	mm	mm	NOUN
fumecheng-7188	201	19	after	after	ADP
fumecheng-7188	201	20	scanning	scan	VERB
fumecheng-7188	201	21	with	with	ADP
fumecheng-7188	201	22	step	step	NOUN
fumecheng-7188	201	23	s	s	PART
fumecheng-7188	201	24	=	=	NOUN
fumecheng-7188	201	25	0.2	0.2	NUM
fumecheng-7188	201	26	mm	mm	NOUN
fumecheng-7188	201	27	,	,	PUNCT
fumecheng-7188	201	28	b	b	NOUN
fumecheng-7188	201	29	)	)	PUNCT
fumecheng-7188	201	30	δmax	δmax	NOUN
fumecheng-7188	201	31	=	=	PUNCT
fumecheng-7188	201	32	0.116	0.116	NUM
fumecheng-7188	201	33	mm	mm	NOUN
fumecheng-7188	201	34	after	after	ADP
fumecheng-7188	201	35	scanning	scan	VERB
fumecheng-7188	201	36	with	with	ADP
fumecheng-7188	201	37	step	step	NOUN
fumecheng-7188	201	38	s	s	PART
fumecheng-7188	201	39	=	=	NOUN
fumecheng-7188	201	40	0.05	0.05	NUM
fumecheng-7188	201	41	mm	mm	NOUN
fumecheng-7188	201	42	this	this	DET
fumecheng-7188	201	43	conclusion	conclusion	NOUN
fumecheng-7188	201	44	is	be	AUX
fumecheng-7188	201	45	confirmed	confirm	VERB
fumecheng-7188	201	46	by	by	ADP
fumecheng-7188	201	47	a	a	DET
fumecheng-7188	201	48	detailed	detailed	ADJ
fumecheng-7188	201	49	analysis	analysis	NOUN
fumecheng-7188	201	50	of	of	ADP
fumecheng-7188	201	51	the	the	DET
fumecheng-7188	201	52	maximal	maximal	ADJ
fumecheng-7188	201	53	deviation	deviation	NOUN
fumecheng-7188	201	54	localization	localization	NOUN
fumecheng-7188	201	55	on	on	ADP
fumecheng-7188	201	56	the	the	DET
fumecheng-7188	201	57	cam	cam	NOUN
fumecheng-7188	201	58	profile	profile	NOUN
fumecheng-7188	201	59	.	.	PUNCT
fumecheng-7188	202	1	irrespective	irrespective	ADV
fumecheng-7188	202	2	of	of	ADP
fumecheng-7188	202	3	what	what	PRON
fumecheng-7188	202	4	sampling	sample	VERB
fumecheng-7188	202	5	step	step	NOUN
fumecheng-7188	202	6	,	,	PUNCT
fumecheng-7188	202	7	scanning	scan	VERB
fumecheng-7188	202	8	velocity	velocity	NOUN
fumecheng-7188	202	9	or	or	CCONJ
fumecheng-7188	202	10	probe	probe	NOUN
fumecheng-7188	202	11	deflection	deflection	NOUN
fumecheng-7188	202	12	was	be	AUX
fumecheng-7188	202	13	applied	apply	VERB
fumecheng-7188	202	14	,	,	PUNCT
fumecheng-7188	202	15	δmax	δmax	PROPN
fumecheng-7188	202	16	was	be	AUX
fumecheng-7188	202	17	identified	identify	VERB
fumecheng-7188	202	18	in	in	ADP
fumecheng-7188	202	19	the	the	DET
fumecheng-7188	202	20	same	same	ADJ
fumecheng-7188	202	21	area	area	NOUN
fumecheng-7188	202	22	.	.	PUNCT
fumecheng-7188	203	1	moreover	moreover	ADV
fumecheng-7188	203	2	,	,	PUNCT
fumecheng-7188	203	3	it	it	PRON
fumecheng-7188	203	4	should	should	AUX
fumecheng-7188	203	5	be	be	AUX
fumecheng-7188	203	6	noted	note	VERB
fumecheng-7188	203	7	that	that	SCONJ
fumecheng-7188	203	8	a	a	DET
fumecheng-7188	203	9	large	large	ADJ
fumecheng-7188	203	10	number	number	NOUN
fumecheng-7188	203	11	of	of	ADP
fumecheng-7188	203	12	probing	probe	VERB
fumecheng-7188	203	13	points	point	NOUN
fumecheng-7188	203	14	effects	effect	NOUN
fumecheng-7188	203	15	in	in	ADP
fumecheng-7188	203	16	increase	increase	NOUN
fumecheng-7188	203	17	of	of	ADP
fumecheng-7188	203	18	the	the	DET
fumecheng-7188	203	19	processing	processing	NOUN
fumecheng-7188	203	20	time	time	NOUN
fumecheng-7188	203	21	and	and	CCONJ
fumecheng-7188	203	22	,	,	PUNCT
fumecheng-7188	203	23	hence	hence	ADV
fumecheng-7188	203	24	,	,	PUNCT
fumecheng-7188	203	25	the	the	DET
fumecheng-7188	203	26	measurement	measurement	NOUN
fumecheng-7188	203	27	lasts	last	VERB
fumecheng-7188	203	28	longer	long	ADV
fumecheng-7188	203	29	.	.	PUNCT
fumecheng-7188	204	1	experimental	experimental	ADJ
fumecheng-7188	204	2	evaluation	evaluation	NOUN
fumecheng-7188	204	3	of	of	ADP
fumecheng-7188	204	4	the	the	DET
fumecheng-7188	204	5	uncertainty	uncertainty	NOUN
fumecheng-7188	204	6	demonstrated	demonstrate	VERB
fumecheng-7188	204	7	that	that	SCONJ
fumecheng-7188	204	8	it	it	PRON
fumecheng-7188	204	9	is	be	AUX
fumecheng-7188	204	10	unnecessary	unnecessary	ADJ
fumecheng-7188	204	11	,	,	PUNCT
fumecheng-7188	204	12	and	and	CCONJ
fumecheng-7188	204	13	the	the	DET
fumecheng-7188	204	14	results	result	NOUN
fumecheng-7188	204	15	with	with	ADP
fumecheng-7188	204	16	similar	similar	ADJ
fumecheng-7188	204	17	uncertainty	uncertainty	NOUN
fumecheng-7188	204	18	may	may	AUX
fumecheng-7188	204	19	be	be	AUX
fumecheng-7188	204	20	obtained	obtain	VERB
fumecheng-7188	204	21	at	at	ADP
fumecheng-7188	204	22	a	a	DET
fumecheng-7188	204	23	larger	large	ADJ
fumecheng-7188	204	24	sampling	sampling	NOUN
fumecheng-7188	204	25	step	step	NOUN
fumecheng-7188	204	26	in	in	ADP
fumecheng-7188	204	27	a	a	DET
fumecheng-7188	204	28	shorter	short	ADJ
fumecheng-7188	204	29	time	time	NOUN
fumecheng-7188	204	30	.	.	PUNCT
fumecheng-7188	205	1	4.3	4.3	NUM
fumecheng-7188	205	2	.	.	PUNCT
fumecheng-7188	205	3	repeatability	repeatability	NOUN
fumecheng-7188	205	4	in	in	ADP
fumecheng-7188	205	5	short	short	ADJ
fumecheng-7188	205	6	measurement	measurement	NOUN
fumecheng-7188	205	7	series	series	NOUN
fumecheng-7188	205	8	table	table	NOUN
fumecheng-7188	205	9	8	8	NUM
fumecheng-7188	205	10	presents	present	VERB
fumecheng-7188	205	11	the	the	DET
fumecheng-7188	205	12	results	result	NOUN
fumecheng-7188	205	13	obtained	obtain	VERB
fumecheng-7188	205	14	subsequently	subsequently	ADV
fumecheng-7188	205	15	for	for	ADP
fumecheng-7188	205	16	the	the	DET
fumecheng-7188	205	17	series	series	NOUN
fumecheng-7188	205	18	no	no	PROPN
fumecheng-7188	205	19	.	.	PROPN
fumecheng-7188	205	20	9	9	NUM
fumecheng-7188	205	21	,	,	PUNCT
fumecheng-7188	205	22	as	as	SCONJ
fumecheng-7188	205	23	described	describe	VERB
fumecheng-7188	205	24	in	in	ADP
fumecheng-7188	205	25	section	section	NOUN
fumecheng-7188	205	26	3.3	3.3	NUM
fumecheng-7188	205	27	.	.	PUNCT
fumecheng-7188	206	1	the	the	DET
fumecheng-7188	206	2	first	first	ADJ
fumecheng-7188	206	3	column	column	NOUN
fumecheng-7188	206	4	presents	present	VERB
fumecheng-7188	206	5	the	the	DET
fumecheng-7188	206	6	number	number	NOUN
fumecheng-7188	206	7	of	of	ADP
fumecheng-7188	206	8	each	each	DET
fumecheng-7188	206	9	measurement	measurement	NOUN
fumecheng-7188	206	10	in	in	ADP
fumecheng-7188	206	11	the	the	DET
fumecheng-7188	206	12	series	series	NOUN
fumecheng-7188	206	13	9	9	NUM
fumecheng-7188	206	14	,	,	PUNCT
fumecheng-7188	206	15	while	while	SCONJ
fumecheng-7188	206	16	the	the	DET
fumecheng-7188	206	17	second	second	ADJ
fumecheng-7188	206	18	one	one	NOUN
fumecheng-7188	206	19	is	be	AUX
fumecheng-7188	206	20	the	the	DET
fumecheng-7188	206	21	number	number	NOUN
fumecheng-7188	206	22	of	of	ADP
fumecheng-7188	206	23	a	a	DET
fumecheng-7188	206	24	group	group	NOUN
fumecheng-7188	206	25	,	,	PUNCT
fumecheng-7188	206	26	as	as	SCONJ
fumecheng-7188	206	27	follows	follow	VERB
fumecheng-7188	206	28	:	:	PUNCT
fumecheng-7188	206	29	5	5	NUM
fumecheng-7188	206	30	repetitions	repetition	NOUN
fumecheng-7188	206	31	in	in	ADP
fumecheng-7188	206	32	the	the	DET
fumecheng-7188	206	33	1st	1st	ADJ
fumecheng-7188	206	34	group	group	NOUN
fumecheng-7188	206	35	,	,	PUNCT
fumecheng-7188	206	36	5	5	NUM
fumecheng-7188	206	37	in	in	ADP
fumecheng-7188	206	38	the	the	DET
fumecheng-7188	206	39	2nd	2nd	ADJ
fumecheng-7188	206	40	and	and	CCONJ
fumecheng-7188	206	41	3rd	3rd	NOUN
fumecheng-7188	206	42	,	,	PUNCT
fumecheng-7188	206	43	respectively	respectively	ADV
fumecheng-7188	206	44	,	,	PUNCT
fumecheng-7188	206	45	10	10	NUM
fumecheng-7188	206	46	repetitions	repetition	NOUN
fumecheng-7188	206	47	in	in	ADP
fumecheng-7188	206	48	the	the	DET
fumecheng-7188	206	49	4th	4th	ADJ
fumecheng-7188	206	50	group	group	NOUN
fumecheng-7188	206	51	and	and	CCONJ
fumecheng-7188	206	52	25	25	NUM
fumecheng-7188	206	53	repetitions	repetition	NOUN
fumecheng-7188	206	54	in	in	ADP
fumecheng-7188	206	55	the	the	DET
fumecheng-7188	206	56	5th	5th	ADJ
fumecheng-7188	206	57	group	group	NOUN
fumecheng-7188	206	58	.	.	PUNCT
fumecheng-7188	207	1	for	for	ADP
fumecheng-7188	207	2	each	each	DET
fumecheng-7188	207	3	group	group	NOUN
fumecheng-7188	207	4	,	,	PUNCT
fumecheng-7188	207	5	respective	respective	ADJ
fumecheng-7188	207	6	standard	standard	ADJ
fumecheng-7188	207	7	deviations	deviation	NOUN
fumecheng-7188	207	8	sn	sn	NOUN
fumecheng-7188	207	9	and	and	CCONJ
fumecheng-7188	207	10	confidence	confidence	NOUN
fumecheng-7188	207	11	intervals	interval	NOUN
fumecheng-7188	207	12	ci	ci	PROPN
fumecheng-7188	207	13	were	be	AUX
fumecheng-7188	207	14	calculated	calculate	VERB
fumecheng-7188	207	15	both	both	CCONJ
fumecheng-7188	207	16	for	for	ADP
fumecheng-7188	207	17	measured	measure	VERB
fumecheng-7188	207	18	deviation	deviation	NOUN
fumecheng-7188	207	19	δ	δ	PROPN
fumecheng-7188	207	20	and	and	CCONJ
fumecheng-7188	207	21	for	for	ADP
fumecheng-7188	207	22	measurement	measurement	NOUN
fumecheng-7188	207	23	time	time	NOUN
fumecheng-7188	207	24	t.	t.	PROPN
fumecheng-7188	207	25	in	in	ADP
fumecheng-7188	207	26	the	the	DET
fumecheng-7188	207	27	last	last	ADJ
fumecheng-7188	207	28	row	row	NOUN
fumecheng-7188	207	29	,	,	PUNCT
fumecheng-7188	207	30	overall	overall	ADJ
fumecheng-7188	207	31	statistics	statistic	NOUN
fumecheng-7188	207	32	is	be	AUX
fumecheng-7188	207	33	added	add	VERB
fumecheng-7188	207	34	for	for	ADP
fumecheng-7188	207	35	the	the	DET
fumecheng-7188	207	36	entire	entire	ADJ
fumecheng-7188	207	37	series	series	NOUN
fumecheng-7188	207	38	no	no	NOUN
fumecheng-7188	207	39	.	.	NOUN
fumecheng-7188	207	40	9	9	NUM
fumecheng-7188	207	41	for	for	ADP
fumecheng-7188	207	42	t0.01,49=2.6802	t0.01,49=2.6802	PROPN
fumecheng-7188	207	43	.	.	PUNCT
fumecheng-7188	207	44	fig	fig	NOUN
fumecheng-7188	207	45	.	.	PUNCT
fumecheng-7188	208	1	8	8	NUM
fumecheng-7188	208	2	shows	show	VERB
fumecheng-7188	208	3	the	the	DET
fumecheng-7188	208	4	histograms	histogram	NOUN
fumecheng-7188	208	5	of	of	ADP
fumecheng-7188	208	6	the	the	DET
fumecheng-7188	208	7	results	result	NOUN
fumecheng-7188	208	8	with	with	ADP
fumecheng-7188	208	9	approximated	approximate	VERB
fumecheng-7188	208	10	distribution	distribution	NOUN
fumecheng-7188	208	11	curves	curve	NOUN
fumecheng-7188	208	12	for	for	ADP
fumecheng-7188	208	13	the	the	DET
fumecheng-7188	208	14	group	group	NOUN
fumecheng-7188	208	15	no	no	NOUN
fumecheng-7188	208	16	.	.	NOUN
fumecheng-7188	208	17	5	5	NUM
fumecheng-7188	208	18	and	and	CCONJ
fumecheng-7188	208	19	for	for	ADP
fumecheng-7188	208	20	overall	overall	ADJ
fumecheng-7188	208	21	statistics	statistic	NOUN
fumecheng-7188	208	22	.	.	PUNCT
fumecheng-7188	209	1	table	table	NOUN
fumecheng-7188	209	2	8	8	NUM
fumecheng-7188	209	3	statistics	statistic	NOUN
fumecheng-7188	209	4	for	for	ADP
fumecheng-7188	209	5	form	form	NOUN
fumecheng-7188	209	6	deviation	deviation	NOUN
fumecheng-7188	209	7	δ	δ	PROPN
fumecheng-7188	209	8	and	and	CCONJ
fumecheng-7188	209	9	scanning	scan	VERB
fumecheng-7188	209	10	time	time	NOUN
fumecheng-7188	209	11	t	t	PROPN
fumecheng-7188	209	12	obtained	obtain	VERB
fumecheng-7188	209	13	at	at	ADP
fumecheng-7188	209	14	vs	vs	ADP
fumecheng-7188	209	15	=	=	SYM
fumecheng-7188	209	16	3	3	NUM
fumecheng-7188	209	17	mm	mm	NOUN
fumecheng-7188	209	18	/	/	SYM
fumecheng-7188	209	19	s	s	PROPN
fumecheng-7188	209	20	with	with	ADP
fumecheng-7188	209	21	sampling	sample	VERB
fumecheng-7188	209	22	step	step	NOUN
fumecheng-7188	209	23	s	s	PART
fumecheng-7188	209	24	=	=	NOUN
fumecheng-7188	209	25	0.2	0.2	NUM
fumecheng-7188	209	26	mm	mm	NOUN
fumecheng-7188	209	27	and	and	CCONJ
fumecheng-7188	209	28	pd=	pd=	ADJ
fumecheng-7188	209	29	0.15	0.15	NUM
fumecheng-7188	209	30	mm	mm	NOUN
fumecheng-7188	209	31	in	in	ADP
fumecheng-7188	209	32	short	short	ADJ
fumecheng-7188	209	33	measurement	measurement	NOUN
fumecheng-7188	209	34	groups	group	NOUN
fumecheng-7188	209	35	group	group	PROPN
fumecheng-7188	209	36	no	no	INTJ
fumecheng-7188	209	37	.	.	PUNCT
fumecheng-7188	210	1			NUM
fumecheng-7188	210	2	[	[	X
fumecheng-7188	210	3	mm	mm	X
fumecheng-7188	210	4	]	]	X
fumecheng-7188	210	5	sn	sn	PROPN
fumecheng-7188	210	6	ci	ci	PROPN
fumecheng-7188	210	7	t	t	PROPN
fumecheng-7188	211	1	[	[	X
fumecheng-7188	211	2	s	s	X
fumecheng-7188	211	3	]	]	X
fumecheng-7188	211	4	sn	sn	NOUN
fumecheng-7188	211	5	ci	ci	PROPN
fumecheng-7188	211	6	1	1	NUM
fumecheng-7188	211	7	0.1172	0.1172	NUM
fumecheng-7188	211	8	0.00164	0.00164	NUM
fumecheng-7188	211	9	0.0076	0.0076	NUM
fumecheng-7188	211	10	61.8	61.8	NUM
fumecheng-7188	211	11	0.837	0.837	NUM
fumecheng-7188	211	12	3.85	3.85	NUM
fumecheng-7188	211	13	2	2	NUM
fumecheng-7188	211	14	0.1150	0.1150	NUM
fumecheng-7188	211	15	0.00255	0.00255	NUM
fumecheng-7188	211	16	0.0117	0.0117	NUM
fumecheng-7188	211	17	65.2	65.2	NUM
fumecheng-7188	211	18	0.447	0.447	NUM
fumecheng-7188	211	19	2.06	2.06	NUM
fumecheng-7188	211	20	3	3	NUM
fumecheng-7188	211	21	0.1150	0.1150	NUM
fumecheng-7188	211	22	0.00173	0.00173	NUM
fumecheng-7188	211	23	0.0080	0.0080	NUM
fumecheng-7188	211	24	62.6	62.6	NUM
fumecheng-7188	211	25	0.548	0.548	NUM
fumecheng-7188	211	26	2.52	2.52	NUM
fumecheng-7188	211	27	4	4	NUM
fumecheng-7188	211	28	0.1153	0.1153	NUM
fumecheng-7188	211	29	0.00125	0.00125	NUM
fumecheng-7188	211	30	0.0041	0.0041	NUM
fumecheng-7188	211	31	60.4	60.4	NUM
fumecheng-7188	211	32	1.35	1.35	NUM
fumecheng-7188	211	33	4.39	4.39	NUM
fumecheng-7188	211	34	5	5	NUM
fumecheng-7188	211	35	0.1146	0.1146	NUM
fumecheng-7188	211	36	0.00115	0.00115	NUM
fumecheng-7188	211	37	0.0032	0.0032	NUM
fumecheng-7188	211	38	62.2	62.2	NUM
fumecheng-7188	211	39	1.165	1.165	NUM
fumecheng-7188	211	40	3.26	3.26	NUM
fumecheng-7188	211	41	overall	overall	ADJ
fumecheng-7188	211	42	0.1151	0.1151	NUM
fumecheng-7188	211	43	0.00158	0.00158	NUM
fumecheng-7188	211	44	0.0042	0.0042	NUM
fumecheng-7188	211	45	62.2	62.2	NUM
fumecheng-7188	211	46	1.646	1.646	NUM
fumecheng-7188	211	47	4.41	4.41	NUM
fumecheng-7188	211	48	accuracy	accuracy	NOUN
fumecheng-7188	211	49	analysis	analysis	NOUN
fumecheng-7188	211	50	of	of	ADP
fumecheng-7188	211	51	the	the	DET
fumecheng-7188	211	52	curved	curved	ADJ
fumecheng-7188	211	53	profile	profile	PROPN
fumecheng-7188	211	54	measurement	measurement	NOUN
fumecheng-7188	211	55	with	with	ADP
fumecheng-7188	211	56	cmm	cmm	NOUN
fumecheng-7188	211	57	:	:	PUNCT
fumecheng-7188	211	58	a	a	DET
fumecheng-7188	211	59	case	case	NOUN
fumecheng-7188	211	60	study	study	NOUN
fumecheng-7188	211	61	133	133	NUM
fumecheng-7188	211	62	fig	fig	NOUN
fumecheng-7188	211	63	.	.	PUNCT
fumecheng-7188	212	1	8	8	NUM
fumecheng-7188	212	2	distribution	distribution	NOUN
fumecheng-7188	212	3	of	of	ADP
fumecheng-7188	212	4	the	the	DET
fumecheng-7188	212	5	results	result	NOUN
fumecheng-7188	212	6	in	in	ADP
fumecheng-7188	212	7	short	short	ADJ
fumecheng-7188	212	8	measurement	measurement	NOUN
fumecheng-7188	212	9	series	series	NOUN
fumecheng-7188	212	10	:	:	PUNCT
fumecheng-7188	212	11	a	a	X
fumecheng-7188	212	12	)	)	PUNCT
fumecheng-7188	212	13	deviation	deviation	NOUN
fumecheng-7188	212	14	δ	δ	PROPN
fumecheng-7188	212	15	and	and	CCONJ
fumecheng-7188	212	16	b	b	X
fumecheng-7188	212	17	)	)	PUNCT
fumecheng-7188	212	18	measurement	measurement	NOUN
fumecheng-7188	212	19	time	time	NOUN
fumecheng-7188	212	20	t	t	PROPN
fumecheng-7188	212	21	interestingly	interestingly	ADV
fumecheng-7188	212	22	,	,	PUNCT
fumecheng-7188	212	23	the	the	DET
fumecheng-7188	212	24	first	first	ADJ
fumecheng-7188	212	25	three	three	NUM
fumecheng-7188	212	26	groups	group	NOUN
fumecheng-7188	212	27	that	that	PRON
fumecheng-7188	212	28	would	would	AUX
fumecheng-7188	212	29	be	be	AUX
fumecheng-7188	212	30	expected	expect	VERB
fumecheng-7188	212	31	to	to	PART
fumecheng-7188	212	32	be	be	AUX
fumecheng-7188	212	33	similar	similar	ADJ
fumecheng-7188	212	34	,	,	PUNCT
fumecheng-7188	212	35	revealed	reveal	VERB
fumecheng-7188	212	36	the	the	DET
fumecheng-7188	212	37	following	follow	VERB
fumecheng-7188	212	38	statistics	statistic	NOUN
fumecheng-7188	212	39	:	:	PUNCT
fumecheng-7188	212	40	mean	mean	VERB
fumecheng-7188	212	41	values	value	NOUN
fumecheng-7188	212	42	were	be	AUX
fumecheng-7188	212	43	similar	similar	ADJ
fumecheng-7188	212	44	for	for	ADP
fumecheng-7188	212	45	groups	group	NOUN
fumecheng-7188	212	46	2	2	NUM
fumecheng-7188	212	47	and	and	CCONJ
fumecheng-7188	212	48	3	3	NUM
fumecheng-7188	212	49	,	,	PUNCT
fumecheng-7188	212	50	with	with	ADP
fumecheng-7188	212	51	2.2	2.2	NUM
fumecheng-7188	212	52	μm	μm	NOUN
fumecheng-7188	212	53	higher	high	ADJ
fumecheng-7188	212	54	for	for	ADP
fumecheng-7188	212	55	group	group	NOUN
fumecheng-7188	212	56	1	1	NUM
fumecheng-7188	212	57	,	,	PUNCT
fumecheng-7188	212	58	but	but	CCONJ
fumecheng-7188	212	59	the	the	DET
fumecheng-7188	212	60	respective	respective	ADJ
fumecheng-7188	212	61	confidence	confidence	NOUN
fumecheng-7188	212	62	intervals	interval	NOUN
fumecheng-7188	212	63	were	be	AUX
fumecheng-7188	212	64	similar	similar	ADJ
fumecheng-7188	212	65	for	for	ADP
fumecheng-7188	212	66	groups	group	NOUN
fumecheng-7188	212	67	1	1	NUM
fumecheng-7188	212	68	and	and	CCONJ
fumecheng-7188	212	69	3	3	NUM
fumecheng-7188	212	70	,	,	PUNCT
fumecheng-7188	212	71	with	with	ADP
fumecheng-7188	212	72	ci	ci	NOUN
fumecheng-7188	212	73	for	for	ADP
fumecheng-7188	212	74	the	the	DET
fumecheng-7188	212	75	group	group	NOUN
fumecheng-7188	212	76	2	2	NUM
fumecheng-7188	212	77	almost	almost	ADV
fumecheng-7188	212	78	50	50	NUM
fumecheng-7188	212	79	%	%	NOUN
fumecheng-7188	212	80	wider	wide	ADJ
fumecheng-7188	212	81	.	.	PUNCT
fumecheng-7188	213	1	for	for	ADP
fumecheng-7188	213	2	the	the	DET
fumecheng-7188	213	3	groups	group	NOUN
fumecheng-7188	213	4	with	with	ADP
fumecheng-7188	213	5	10	10	NUM
fumecheng-7188	213	6	and	and	CCONJ
fumecheng-7188	213	7	25	25	NUM
fumecheng-7188	213	8	repetitions	repetition	NOUN
fumecheng-7188	213	9	,	,	PUNCT
fumecheng-7188	213	10	confidence	confidence	NOUN
fumecheng-7188	213	11	intervals	interval	NOUN
fumecheng-7188	213	12	reduced	reduce	VERB
fumecheng-7188	213	13	substantially	substantially	ADV
fumecheng-7188	213	14	,	,	PUNCT
fumecheng-7188	213	15	down	down	ADP
fumecheng-7188	213	16	to	to	ADP
fumecheng-7188	213	17	0.0041	0.0041	NUM
fumecheng-7188	213	18	and	and	CCONJ
fumecheng-7188	213	19	0.0032	0.0032	NUM
fumecheng-7188	213	20	,	,	PUNCT
fumecheng-7188	213	21	respectively	respectively	ADV
fumecheng-7188	213	22	.	.	PUNCT
fumecheng-7188	214	1	notably	notably	ADV
fumecheng-7188	214	2	,	,	PUNCT
fumecheng-7188	214	3	mean	mean	ADJ
fumecheng-7188	214	4	value	value	NOUN
fumecheng-7188	214	5	for	for	ADP
fumecheng-7188	214	6	group	group	NOUN
fumecheng-7188	214	7	4	4	NUM
fumecheng-7188	214	8	was	be	AUX
fumecheng-7188	214	9	slightly	slightly	ADV
fumecheng-7188	214	10	higher	high	ADJ
fumecheng-7188	214	11	than	than	ADP
fumecheng-7188	214	12	that	that	PRON
fumecheng-7188	214	13	for	for	ADP
fumecheng-7188	214	14	groups	group	NOUN
fumecheng-7188	214	15	2	2	NUM
fumecheng-7188	214	16	and	and	CCONJ
fumecheng-7188	214	17	3	3	NUM
fumecheng-7188	214	18	,	,	PUNCT
fumecheng-7188	214	19	while	while	SCONJ
fumecheng-7188	214	20	for	for	ADP
fumecheng-7188	214	21	group	group	NOUN
fumecheng-7188	214	22	5	5	NUM
fumecheng-7188	214	23	it	it	PRON
fumecheng-7188	214	24	was	be	AUX
fumecheng-7188	214	25	slightly	slightly	ADV
fumecheng-7188	214	26	lower	low	ADJ
fumecheng-7188	214	27	.	.	PUNCT
fumecheng-7188	215	1	the	the	DET
fumecheng-7188	215	2	difference	difference	NOUN
fumecheng-7188	215	3	was	be	AUX
fumecheng-7188	215	4	smaller	small	ADJ
fumecheng-7188	215	5	than	than	ADP
fumecheng-7188	215	6	0.4	0.4	NUM
fumecheng-7188	215	7	μm	μm	NOUN
fumecheng-7188	215	8	,	,	PUNCT
fumecheng-7188	215	9	significantly	significantly	ADV
fumecheng-7188	215	10	below	below	ADP
fumecheng-7188	215	11	the	the	DET
fumecheng-7188	215	12	maximum	maximum	ADJ
fumecheng-7188	215	13	permissible	permissible	ADJ
fumecheng-7188	215	14	error	error	NOUN
fumecheng-7188	215	15	e0,mpe	e0,mpe	X
fumecheng-7188	215	16	=	=	PUNCT
fumecheng-7188	215	17	(	(	PUNCT
fumecheng-7188	215	18	1.7	1.7	NUM
fumecheng-7188	215	19	+	+	NOUN
fumecheng-7188	215	20	3l/1000	3l/1000	NOUN
fumecheng-7188	215	21	)	)	PUNCT
fumecheng-7188	215	22	μm	μm	NOUN
fumecheng-7188	215	23	for	for	ADP
fumecheng-7188	215	24	the	the	DET
fumecheng-7188	215	25	cmm	cmm	NOUN
fumecheng-7188	215	26	used	use	VERB
fumecheng-7188	215	27	in	in	ADP
fumecheng-7188	215	28	experiments	experiment	NOUN
fumecheng-7188	215	29	.	.	PUNCT
fumecheng-7188	216	1	5	5	X
fumecheng-7188	216	2	.	.	X
fumecheng-7188	216	3	conclusions	conclusion	NOUN
fumecheng-7188	216	4	the	the	DET
fumecheng-7188	216	5	results	result	NOUN
fumecheng-7188	216	6	of	of	ADP
fumecheng-7188	216	7	the	the	DET
fumecheng-7188	216	8	experimental	experimental	ADJ
fumecheng-7188	216	9	research	research	NOUN
fumecheng-7188	216	10	studies	study	NOUN
fumecheng-7188	216	11	demonstrated	demonstrate	VERB
fumecheng-7188	216	12	that	that	SCONJ
fumecheng-7188	216	13	increased	increase	VERB
fumecheng-7188	216	14	probe	probe	NOUN
fumecheng-7188	216	15	deflections	deflection	NOUN
fumecheng-7188	216	16	pd	pd	PROPN
fumecheng-7188	216	17	reduced	reduce	VERB
fumecheng-7188	216	18	the	the	DET
fumecheng-7188	216	19	values	value	NOUN
fumecheng-7188	216	20	of	of	ADP
fumecheng-7188	216	21	measured	measure	VERB
fumecheng-7188	216	22	form	form	NOUN
fumecheng-7188	216	23	deviation	deviation	NOUN
fumecheng-7188	216	24	.	.	PUNCT
fumecheng-7188	217	1	additionally	additionally	ADV
fumecheng-7188	217	2	,	,	PUNCT
fumecheng-7188	217	3	pd	pd	X
fumecheng-7188	217	4	higher	high	ADJ
fumecheng-7188	217	5	than	than	ADP
fumecheng-7188	217	6	0.2	0.2	NUM
fumecheng-7188	217	7	mm	mm	NOUN
fumecheng-7188	217	8	increased	increase	VERB
fumecheng-7188	217	9	the	the	DET
fumecheng-7188	217	10	results	result	NOUN
fumecheng-7188	217	11	dispersion	dispersion	NOUN
fumecheng-7188	217	12	.	.	PUNCT
fumecheng-7188	218	1	it	it	PRON
fumecheng-7188	218	2	was	be	AUX
fumecheng-7188	218	3	found	find	VERB
fumecheng-7188	218	4	also	also	ADV
fumecheng-7188	218	5	that	that	SCONJ
fumecheng-7188	218	6	the	the	DET
fumecheng-7188	218	7	measurement	measurement	NOUN
fumecheng-7188	218	8	uncertainty	uncertainty	NOUN
fumecheng-7188	218	9	did	do	AUX
fumecheng-7188	218	10	not	not	PART
fumecheng-7188	218	11	depend	depend	VERB
fumecheng-7188	218	12	on	on	ADP
fumecheng-7188	218	13	the	the	DET
fumecheng-7188	218	14	scanning	scanning	NOUN
fumecheng-7188	218	15	sampling	sample	VERB
fumecheng-7188	218	16	step	step	NOUN
fumecheng-7188	218	17	from	from	ADP
fumecheng-7188	218	18	0.05	0.05	NUM
fumecheng-7188	218	19	to	to	PART
fumecheng-7188	218	20	0.2	0.2	NUM
fumecheng-7188	218	21	mm	mm	NOUN
fumecheng-7188	218	22	,	,	PUNCT
fumecheng-7188	218	23	but	but	CCONJ
fumecheng-7188	218	24	it	it	PRON
fumecheng-7188	218	25	should	should	AUX
fumecheng-7188	218	26	be	be	AUX
fumecheng-7188	218	27	noted	note	VERB
fumecheng-7188	218	28	that	that	SCONJ
fumecheng-7188	218	29	a	a	DET
fumecheng-7188	218	30	smaller	small	ADJ
fumecheng-7188	218	31	step	step	NOUN
fumecheng-7188	218	32	increased	increase	VERB
fumecheng-7188	218	33	the	the	DET
fumecheng-7188	218	34	measurement	measurement	NOUN
fumecheng-7188	218	35	time	time	NOUN
fumecheng-7188	218	36	.	.	PUNCT
fumecheng-7188	219	1			NUM
fumecheng-7188	219	2			NUM
fumecheng-7188	219	3			NUM
fumecheng-7188	219	4	134	134	NUM
fumecheng-7188	219	5	t.	t.	NOUN
fumecheng-7188	219	6	mazur	mazur	PROPN
fumecheng-7188	219	7	,	,	PUNCT
fumecheng-7188	219	8	m.	m.	PROPN
fumecheng-7188	219	9	rucki	rucki	PROPN
fumecheng-7188	219	10	,	,	PUNCT
fumecheng-7188	219	11	y.	y.	PROPN
fumecheng-7188	219	12	gutsalenko	gutsalenko	PROPN
fumecheng-7188	219	13	noteworthy	noteworthy	ADJ
fumecheng-7188	219	14	,	,	PUNCT
fumecheng-7188	219	15	the	the	DET
fumecheng-7188	219	16	true	true	ADJ
fumecheng-7188	219	17	measurement	measurement	NOUN
fumecheng-7188	219	18	time	time	NOUN
fumecheng-7188	219	19	was	be	AUX
fumecheng-7188	219	20	for	for	ADP
fumecheng-7188	219	21	30	30	NUM
fumecheng-7188	219	22	-	-	SYM
fumecheng-7188	219	23	40	40	NUM
fumecheng-7188	219	24	%	%	NOUN
fumecheng-7188	219	25	longer	long	ADV
fumecheng-7188	219	26	than	than	ADP
fumecheng-7188	219	27	that	that	PRON
fumecheng-7188	219	28	declared	declare	VERB
fumecheng-7188	219	29	by	by	ADP
fumecheng-7188	219	30	nominal	nominal	ADJ
fumecheng-7188	219	31	scanning	scanning	NOUN
fumecheng-7188	219	32	velocity	velocity	NOUN
fumecheng-7188	219	33	.	.	PUNCT
fumecheng-7188	220	1	these	these	DET
fumecheng-7188	220	2	characteristics	characteristic	NOUN
fumecheng-7188	220	3	must	must	AUX
fumecheng-7188	220	4	be	be	AUX
fumecheng-7188	220	5	taken	take	VERB
fumecheng-7188	220	6	into	into	ADP
fumecheng-7188	220	7	consideration	consideration	NOUN
fumecheng-7188	220	8	when	when	SCONJ
fumecheng-7188	220	9	projecting	project	VERB
fumecheng-7188	220	10	the	the	DET
fumecheng-7188	220	11	batch	batch	NOUN
fumecheng-7188	220	12	inspection	inspection	NOUN
fumecheng-7188	220	13	procedures	procedure	NOUN
fumecheng-7188	220	14	,	,	PUNCT
fumecheng-7188	220	15	especially	especially	ADV
fumecheng-7188	220	16	when	when	SCONJ
fumecheng-7188	220	17	100	100	NUM
fumecheng-7188	220	18	%	%	NOUN
fumecheng-7188	220	19	of	of	ADP
fumecheng-7188	220	20	parts	part	NOUN
fumecheng-7188	220	21	must	must	AUX
fumecheng-7188	220	22	be	be	AUX
fumecheng-7188	220	23	measured	measure	VERB
fumecheng-7188	220	24	.	.	PUNCT
fumecheng-7188	221	1	moreover	moreover	ADV
fumecheng-7188	221	2	,	,	PUNCT
fumecheng-7188	221	3	there	there	PRON
fumecheng-7188	221	4	is	be	VERB
fumecheng-7188	221	5	no	no	DET
fumecheng-7188	221	6	necessity	necessity	NOUN
fumecheng-7188	221	7	in	in	ADP
fumecheng-7188	221	8	the	the	DET
fumecheng-7188	221	9	increased	increase	VERB
fumecheng-7188	221	10	number	number	NOUN
fumecheng-7188	221	11	of	of	ADP
fumecheng-7188	221	12	repetitions	repetition	NOUN
fumecheng-7188	221	13	since	since	SCONJ
fumecheng-7188	221	14	even	even	ADV
fumecheng-7188	221	15	a	a	DET
fumecheng-7188	221	16	small	small	ADJ
fumecheng-7188	221	17	number	number	NOUN
fumecheng-7188	221	18	of	of	ADP
fumecheng-7188	221	19	repetitions	repetition	NOUN
fumecheng-7188	221	20	gave	give	VERB
fumecheng-7188	221	21	similar	similar	ADJ
fumecheng-7188	221	22	mean	mean	NOUN
fumecheng-7188	221	23	results	result	NOUN
fumecheng-7188	221	24	with	with	ADP
fumecheng-7188	221	25	differences	difference	NOUN
fumecheng-7188	221	26	close	close	ADV
fumecheng-7188	221	27	to	to	ADP
fumecheng-7188	221	28	the	the	DET
fumecheng-7188	221	29	maximum	maximum	ADJ
fumecheng-7188	221	30	permissible	permissible	ADJ
fumecheng-7188	221	31	error	error	NOUN
fumecheng-7188	221	32	of	of	ADP
fumecheng-7188	221	33	the	the	DET
fumecheng-7188	221	34	cmm	cmm	NOUN
fumecheng-7188	221	35	.	.	PUNCT
fumecheng-7188	222	1	the	the	DET
fumecheng-7188	222	2	most	most	ADV
fumecheng-7188	222	3	important	important	ADJ
fumecheng-7188	222	4	conclusion	conclusion	NOUN
fumecheng-7188	222	5	is	be	AUX
fumecheng-7188	222	6	that	that	SCONJ
fumecheng-7188	222	7	the	the	DET
fumecheng-7188	222	8	highest	high	ADJ
fumecheng-7188	222	9	value	value	NOUN
fumecheng-7188	222	10	of	of	ADP
fumecheng-7188	222	11	form	form	NOUN
fumecheng-7188	222	12	deviation	deviation	NOUN
fumecheng-7188	222	13	was	be	AUX
fumecheng-7188	222	14	identified	identify	VERB
fumecheng-7188	222	15	in	in	ADP
fumecheng-7188	222	16	the	the	DET
fumecheng-7188	222	17	same	same	ADJ
fumecheng-7188	222	18	location	location	NOUN
fumecheng-7188	222	19	irrespective	irrespective	ADV
fumecheng-7188	222	20	of	of	ADP
fumecheng-7188	222	21	the	the	DET
fumecheng-7188	222	22	applied	apply	VERB
fumecheng-7188	222	23	measurement	measurement	NOUN
fumecheng-7188	222	24	parameters	parameter	NOUN
fumecheng-7188	222	25	.	.	PUNCT
fumecheng-7188	223	1	expanded	expand	VERB
fumecheng-7188	223	2	uncertainty	uncertainty	NOUN
fumecheng-7188	223	3	of	of	ADP
fumecheng-7188	223	4	form	form	NOUN
fumecheng-7188	223	5	deviation	deviation	NOUN
fumecheng-7188	223	6	measurement	measurement	NOUN
fumecheng-7188	223	7	at	at	ADP
fumecheng-7188	223	8	the	the	DET
fumecheng-7188	223	9	level	level	NOUN
fumecheng-7188	223	10	of	of	ADP
fumecheng-7188	223	11	confidence	confidence	NOUN
fumecheng-7188	223	12	p	p	NOUN
fumecheng-7188	223	13	=	=	NOUN
fumecheng-7188	223	14	99	99	NUM
fumecheng-7188	223	15	%	%	NOUN
fumecheng-7188	223	16	was	be	AUX
fumecheng-7188	223	17	u0.99	u0.99	PROPN
fumecheng-7188	223	18	=	=	PUNCT
fumecheng-7188	223	19	0.005	0.005	NUM
fumecheng-7188	223	20	mm	mm	NOUN
fumecheng-7188	223	21	,	,	PUNCT
fumecheng-7188	223	22	less	less	ADJ
fumecheng-7188	223	23	than	than	ADP
fumecheng-7188	223	24	10	10	NUM
fumecheng-7188	223	25	%	%	NOUN
fumecheng-7188	223	26	of	of	ADP
fumecheng-7188	223	27	the	the	DET
fumecheng-7188	223	28	measured	measure	VERB
fumecheng-7188	223	29	tolerance	tolerance	NOUN
fumecheng-7188	223	30	.	.	PUNCT
fumecheng-7188	224	1	this	this	DET
fumecheng-7188	224	2	value	value	NOUN
fumecheng-7188	224	3	proved	prove	VERB
fumecheng-7188	224	4	that	that	SCONJ
fumecheng-7188	224	5	the	the	DET
fumecheng-7188	224	6	chosen	choose	VERB
fumecheng-7188	224	7	cmm	cmm	PROPN
fumecheng-7188	224	8	as	as	ADV
fumecheng-7188	224	9	well	well	ADV
fumecheng-7188	224	10	as	as	ADP
fumecheng-7188	224	11	the	the	DET
fumecheng-7188	224	12	inspection	inspection	NOUN
fumecheng-7188	224	13	methodology	methodology	NOUN
fumecheng-7188	224	14	were	be	AUX
fumecheng-7188	224	15	appropriate	appropriate	ADJ
fumecheng-7188	224	16	for	for	ADP
fumecheng-7188	224	17	the	the	DET
fumecheng-7188	224	18	measurement	measurement	NOUN
fumecheng-7188	224	19	of	of	ADP
fumecheng-7188	224	20	the	the	DET
fumecheng-7188	224	21	given	give	VERB
fumecheng-7188	224	22	curved	curved	ADJ
fumecheng-7188	224	23	profile	profile	NOUN
fumecheng-7188	224	24	.	.	PUNCT
fumecheng-7188	225	1	acknowledgements	acknowledgement	NOUN
fumecheng-7188	225	2	:	:	PUNCT
fumecheng-7188	225	3	the	the	DET
fumecheng-7188	225	4	paper	paper	NOUN
fumecheng-7188	225	5	is	be	AUX
fumecheng-7188	225	6	a	a	DET
fumecheng-7188	225	7	part	part	NOUN
fumecheng-7188	225	8	of	of	ADP
fumecheng-7188	225	9	the	the	DET
fumecheng-7188	225	10	research	research	NOUN
fumecheng-7188	225	11	program	program	NOUN
fumecheng-7188	225	12	conducted	conduct	VERB
fumecheng-7188	225	13	at	at	ADP
fumecheng-7188	225	14	the	the	DET
fumecheng-7188	225	15	faculty	faculty	NOUN
fumecheng-7188	225	16	of	of	ADP
fumecheng-7188	225	17	mechanical	mechanical	ADJ
fumecheng-7188	225	18	engineering	engineering	NOUN
fumecheng-7188	225	19	,	,	PUNCT
fumecheng-7188	225	20	kazimierz	kazimierz	PROPN
fumecheng-7188	225	21	pulaski	pulaski	PROPN
fumecheng-7188	225	22	university	university	PROPN
fumecheng-7188	225	23	of	of	ADP
fumecheng-7188	225	24	technology	technology	NOUN
fumecheng-7188	225	25	and	and	CCONJ
fumecheng-7188	225	26	humanities	humanity	NOUN
fumecheng-7188	225	27	in	in	ADP
fumecheng-7188	225	28	radom	radom	NOUN
fumecheng-7188	225	29	,	,	PUNCT
fumecheng-7188	225	30	poland	poland	PROPN
fumecheng-7188	225	31	.	.	PUNCT
fumecheng-7188	226	1	no	no	DET
fumecheng-7188	226	2	specific	specific	ADJ
fumecheng-7188	226	3	funds	fund	NOUN
fumecheng-7188	226	4	were	be	AUX
fumecheng-7188	226	5	applied	apply	VERB
fumecheng-7188	226	6	.	.	PUNCT
fumecheng-7188	227	1	references	reference	NOUN
fumecheng-7188	227	2	1	1	NUM
fumecheng-7188	227	3	.	.	PUNCT
fumecheng-7188	228	1	bo	bo	PROPN
fumecheng-7188	228	2	,	,	PUNCT
fumecheng-7188	228	3	p.	p.	NOUN
fumecheng-7188	228	4	,	,	PUNCT
fumecheng-7188	228	5	bartoň	bartoň	NOUN
fumecheng-7188	228	6	,	,	PUNCT
fumecheng-7188	228	7	m.	m.	NOUN
fumecheng-7188	228	8	,	,	PUNCT
fumecheng-7188	228	9	2019	2019	NUM
fumecheng-7188	228	10	,	,	PUNCT
fumecheng-7188	228	11	on	on	ADP
fumecheng-7188	228	12	initialization	initialization	NOUN
fumecheng-7188	228	13	of	of	ADP
fumecheng-7188	228	14	milling	mill	VERB
fumecheng-7188	228	15	paths	path	NOUN
fumecheng-7188	228	16	for	for	ADP
fumecheng-7188	228	17	5	5	NUM
fumecheng-7188	228	18	-	-	PUNCT
fumecheng-7188	228	19	axis	axis	NOUN
fumecheng-7188	228	20	flank	flank	NOUN
fumecheng-7188	228	21	cnc	cnc	PROPN
fumecheng-7188	228	22	machining	machining	NOUN
fumecheng-7188	228	23	of	of	ADP
fumecheng-7188	228	24	free	free	ADJ
fumecheng-7188	228	25	-	-	PUNCT
fumecheng-7188	228	26	form	form	NOUN
fumecheng-7188	228	27	surfaces	surface	NOUN
fumecheng-7188	228	28	with	with	ADP
fumecheng-7188	228	29	general	general	ADJ
fumecheng-7188	228	30	milling	milling	NOUN
fumecheng-7188	228	31	tools	tool	NOUN
fumecheng-7188	228	32	,	,	PUNCT
fumecheng-7188	228	33	computer	computer	NOUN
fumecheng-7188	228	34	aided	aid	VERB
fumecheng-7188	228	35	geometric	geometric	ADJ
fumecheng-7188	228	36	design	design	NOUN
fumecheng-7188	228	37	,	,	PUNCT
fumecheng-7188	228	38	71	71	NUM
fumecheng-7188	228	39	,	,	PUNCT
fumecheng-7188	228	40	pp	pp	ADV
fumecheng-7188	228	41	30	30	NUM
fumecheng-7188	228	42	-	-	SYM
fumecheng-7188	228	43	42	42	NUM
fumecheng-7188	228	44	.	.	PUNCT
fumecheng-7188	229	1	2	2	NUM
fumecheng-7188	229	2	.	.	X
fumecheng-7188	229	3	vosniakos	vosniakos	PROPN
fumecheng-7188	229	4	,	,	PUNCT
fumecheng-7188	229	5	g.	g.	PROPN
fumecheng-7188	229	6	,	,	PUNCT
fumecheng-7188	229	7	pipinis	pipinis	NOUN
fumecheng-7188	229	8	,	,	PUNCT
fumecheng-7188	229	9	g.	g.	PROPN
fumecheng-7188	229	10	,	,	PUNCT
fumecheng-7188	229	11	kostazos	kostazos	PROPN
fumecheng-7188	229	12	,	,	PUNCT
fumecheng-7188	229	13	p.	p.	NOUN
fumecheng-7188	229	14	,	,	PUNCT
fumecheng-7188	229	15	2021	2021	NUM
fumecheng-7188	229	16	,	,	PUNCT
fumecheng-7188	229	17	numerical	numerical	ADJ
fumecheng-7188	229	18	simulation	simulation	NOUN
fumecheng-7188	229	19	of	of	ADP
fumecheng-7188	229	20	single	single	ADJ
fumecheng-7188	229	21	point	point	NOUN
fumecheng-7188	229	22	incremental	incremental	ADJ
fumecheng-7188	229	23	forming	form	VERB
fumecheng-7188	229	24	for	for	ADP
fumecheng-7188	229	25	asymmetric	asymmetric	ADJ
fumecheng-7188	229	26	parts	part	NOUN
fumecheng-7188	229	27	,	,	PUNCT
fumecheng-7188	229	28	facta	facta	PROPN
fumecheng-7188	229	29	universitatis	universitatis	PROPN
fumecheng-7188	229	30	-	-	PUNCT
fumecheng-7188	229	31	series	series	NOUN
fumecheng-7188	229	32	mechanical	mechanical	ADJ
fumecheng-7188	229	33	engineering	engineering	NOUN
fumecheng-7188	229	34	,	,	PUNCT
fumecheng-7188	229	35	doi	doi	NOUN
fumecheng-7188	229	36	:	:	PUNCT
fumecheng-7188	229	37	10.22190	10.22190	NUM
fumecheng-7188	229	38	/	/	SYM
fumecheng-7188	229	39	fume201210046v	fume201210046v	NOUN
fumecheng-7188	229	40	.	.	PUNCT
fumecheng-7188	230	1	3	3	X
fumecheng-7188	230	2	.	.	X
fumecheng-7188	230	3	jiang	jiang	PROPN
fumecheng-7188	230	4	,	,	PUNCT
fumecheng-7188	230	5	x.	x.	PROPN
fumecheng-7188	230	6	j.	j.	PROPN
fumecheng-7188	230	7	,	,	PUNCT
fumecheng-7188	230	8	scott	scott	PROPN
fumecheng-7188	230	9	,	,	PUNCT
fumecheng-7188	230	10	p.	p.	PROPN
fumecheng-7188	230	11	j.	j.	PROPN
fumecheng-7188	230	12	,	,	PUNCT
fumecheng-7188	230	13	2020	2020	NUM
fumecheng-7188	230	14	,	,	PUNCT
fumecheng-7188	230	15	chapter	chapter	NOUN
fumecheng-7188	230	16	10	10	NUM
fumecheng-7188	230	17	characterization	characterization	NOUN
fumecheng-7188	230	18	of	of	ADP
fumecheng-7188	230	19	free	free	ADJ
fumecheng-7188	230	20	-	-	PUNCT
fumecheng-7188	230	21	form	form	NOUN
fumecheng-7188	230	22	surfaces	surface	NOUN
fumecheng-7188	230	23	,	,	PUNCT
fumecheng-7188	230	24	in	in	ADP
fumecheng-7188	230	25	:	:	PUNCT
fumecheng-7188	230	26	x.j	x.j	PROPN
fumecheng-7188	230	27	.	.	PROPN
fumecheng-7188	230	28	jiang	jiang	PROPN
fumecheng-7188	230	29	,	,	PUNCT
fumecheng-7188	230	30	p.j	p.j	PROPN
fumecheng-7188	230	31	.	.	PROPN
fumecheng-7188	230	32	scott	scott	PROPN
fumecheng-7188	230	33	(	(	PUNCT
fumecheng-7188	230	34	eds	ed	NOUN
fumecheng-7188	230	35	.	.	PUNCT
fumecheng-7188	230	36	)	)	PUNCT
fumecheng-7188	230	37	,	,	PUNCT
fumecheng-7188	230	38	advanced	advanced	ADJ
fumecheng-7188	230	39	metrology	metrology	NOUN
fumecheng-7188	230	40	,	,	PUNCT
fumecheng-7188	230	41	academic	academic	ADJ
fumecheng-7188	230	42	press	press	NOUN
fumecheng-7188	230	43	,	,	PUNCT
fumecheng-7188	230	44	pp	pp	ADJ
fumecheng-7188	230	45	.	.	PUNCT
fumecheng-7188	231	1	247	247	NUM
fumecheng-7188	231	2	-	-	SYM
fumecheng-7188	231	3	280	280	NUM
fumecheng-7188	231	4	.	.	NOUN
fumecheng-7188	232	1	4	4	NUM
fumecheng-7188	232	2	.	.	X
fumecheng-7188	232	3	fleischer	fleischer	PROPN
fumecheng-7188	232	4	,	,	PUNCT
fumecheng-7188	232	5	j.	j.	PROPN
fumecheng-7188	232	6	,	,	PUNCT
fumecheng-7188	232	7	munzinger	munzinger	PROPN
fumecheng-7188	232	8	,	,	PUNCT
fumecheng-7188	232	9	c.	c.	PROPN
fumecheng-7188	232	10	,	,	PUNCT
fumecheng-7188	232	11	lanza	lanza	PROPN
fumecheng-7188	232	12	,	,	PUNCT
fumecheng-7188	232	13	g.	g.	PROPN
fumecheng-7188	232	14	,	,	PUNCT
fumecheng-7188	232	15	ruch	ruch	PROPN
fumecheng-7188	232	16	,	,	PUNCT
fumecheng-7188	232	17	d.	d.	PROPN
fumecheng-7188	232	18	,	,	PUNCT
fumecheng-7188	232	19	2009	2009	NUM
fumecheng-7188	232	20	,	,	PUNCT
fumecheng-7188	232	21	position	position	NOUN
fumecheng-7188	232	22	and	and	CCONJ
fumecheng-7188	232	23	contour	contour	NOUN
fumecheng-7188	232	24	detection	detection	NOUN
fumecheng-7188	232	25	of	of	ADP
fumecheng-7188	232	26	spatially	spatially	ADV
fumecheng-7188	232	27	curved	curved	ADJ
fumecheng-7188	232	28	profiles	profile	NOUN
fumecheng-7188	232	29	on	on	ADP
fumecheng-7188	232	30	the	the	DET
fumecheng-7188	232	31	basis	basis	NOUN
fumecheng-7188	232	32	of	of	ADP
fumecheng-7188	232	33	a	a	DET
fumecheng-7188	232	34	component	component	NOUN
fumecheng-7188	232	35	-	-	PUNCT
fumecheng-7188	232	36	specific	specific	ADJ
fumecheng-7188	232	37	scale	scale	NOUN
fumecheng-7188	232	38	,	,	PUNCT
fumecheng-7188	232	39	cirp	cirp	NOUN
fumecheng-7188	232	40	annals	annal	NOUN
fumecheng-7188	232	41	–	–	PUNCT
fumecheng-7188	232	42	manufacturing	manufacturing	NOUN
fumecheng-7188	232	43	technology	technology	NOUN
fumecheng-7188	232	44	,	,	PUNCT
fumecheng-7188	232	45	58(1	58(1	NUM
fumecheng-7188	232	46	)	)	PUNCT
fumecheng-7188	232	47	,	,	PUNCT
fumecheng-7188	232	48	pp	pp	ADP
fumecheng-7188	232	49	.	.	PUNCT
fumecheng-7188	233	1	481	481	NUM
fumecheng-7188	233	2	-	-	SYM
fumecheng-7188	233	3	484	484	NUM
fumecheng-7188	233	4	.	.	PUNCT
fumecheng-7188	234	1	5	5	X
fumecheng-7188	234	2	.	.	X
fumecheng-7188	234	3	weckenmann	weckenmann	NOUN
fumecheng-7188	234	4	,	,	PUNCT
fumecheng-7188	234	5	a.	a.	NOUN
fumecheng-7188	234	6	,	,	PUNCT
fumecheng-7188	234	7	knauer	knauer	NOUN
fumecheng-7188	234	8	,	,	PUNCT
fumecheng-7188	234	9	m.	m.	NOUN
fumecheng-7188	234	10	,	,	PUNCT
fumecheng-7188	234	11	1998	1998	NUM
fumecheng-7188	234	12	,	,	PUNCT
fumecheng-7188	234	13	the	the	DET
fumecheng-7188	234	14	influence	influence	NOUN
fumecheng-7188	234	15	of	of	ADP
fumecheng-7188	234	16	measurement	measurement	NOUN
fumecheng-7188	234	17	strategy	strategy	NOUN
fumecheng-7188	234	18	on	on	ADP
fumecheng-7188	234	19	the	the	DET
fumecheng-7188	234	20	uncertainty	uncertainty	NOUN
fumecheng-7188	234	21	of	of	ADP
fumecheng-7188	234	22	cmm	cmm	NOUN
fumecheng-7188	234	23	-	-	NOUN
fumecheng-7188	234	24	measurements	measurement	NOUN
fumecheng-7188	234	25	,	,	PUNCT
fumecheng-7188	234	26	annals	annal	NOUN
fumecheng-7188	234	27	of	of	ADP
fumecheng-7188	234	28	the	the	DET
fumecheng-7188	234	29	clrp	clrp	NOUN
fumecheng-7188	234	30	,	,	PUNCT
fumecheng-7188	234	31	47(7	47(7	NOUN
fumecheng-7188	234	32	)	)	PUNCT
fumecheng-7188	234	33	,	,	PUNCT
fumecheng-7188	234	34	pp	pp	ADJ
fumecheng-7188	234	35	.	.	PUNCT
fumecheng-7188	235	1	451	451	NUM
fumecheng-7188	235	2	-	-	SYM
fumecheng-7188	235	3	454	454	NUM
fumecheng-7188	235	4	.	.	PUNCT
fumecheng-7188	236	1	6	6	NUM
fumecheng-7188	236	2	.	.	X
fumecheng-7188	236	3	poniatowska	poniatowska	PROPN
fumecheng-7188	236	4	,	,	PUNCT
fumecheng-7188	236	5	m.	m.	NOUN
fumecheng-7188	236	6	,	,	PUNCT
fumecheng-7188	236	7	2012	2012	NUM
fumecheng-7188	236	8	,	,	PUNCT
fumecheng-7188	236	9	deviation	deviation	NOUN
fumecheng-7188	236	10	model	model	NOUN
fumecheng-7188	236	11	based	base	VERB
fumecheng-7188	236	12	method	method	NOUN
fumecheng-7188	236	13	of	of	ADP
fumecheng-7188	236	14	planning	planning	NOUN
fumecheng-7188	236	15	accuracy	accuracy	NOUN
fumecheng-7188	236	16	inspection	inspection	NOUN
fumecheng-7188	236	17	of	of	ADP
fumecheng-7188	236	18	free	free	ADJ
fumecheng-7188	236	19	-	-	PUNCT
fumecheng-7188	236	20	form	form	NOUN
fumecheng-7188	236	21	surfaces	surface	NOUN
fumecheng-7188	236	22	using	use	VERB
fumecheng-7188	236	23	cmms	cmms	NOUN
fumecheng-7188	236	24	,	,	PUNCT
fumecheng-7188	236	25	measurement	measurement	NOUN
fumecheng-7188	236	26	,	,	PUNCT
fumecheng-7188	236	27	45(5	45(5	NOUN
fumecheng-7188	236	28	)	)	PUNCT
fumecheng-7188	236	29	,	,	PUNCT
fumecheng-7188	236	30	pp	pp	ADP
fumecheng-7188	236	31	927	927	NUM
fumecheng-7188	236	32	-	-	SYM
fumecheng-7188	236	33	937	937	NUM
fumecheng-7188	236	34	.	.	PUNCT
fumecheng-7188	237	1	7	7	X
fumecheng-7188	237	2	.	.	X
fumecheng-7188	237	3	xiong	xiong	PROPN
fumecheng-7188	237	4	,	,	PUNCT
fumecheng-7188	237	5	y.l	y.l	PROPN
fumecheng-7188	237	6	.	.	PROPN
fumecheng-7188	237	7	,	,	PUNCT
fumecheng-7188	237	8	1990	1990	NUM
fumecheng-7188	237	9	,	,	PUNCT
fumecheng-7188	237	10	computer	computer	NOUN
fumecheng-7188	237	11	aided	aid	VERB
fumecheng-7188	237	12	measurement	measurement	NOUN
fumecheng-7188	237	13	of	of	ADP
fumecheng-7188	237	14	profile	profile	NOUN
fumecheng-7188	237	15	error	error	NOUN
fumecheng-7188	237	16	of	of	ADP
fumecheng-7188	237	17	complex	complex	ADJ
fumecheng-7188	237	18	surfaces	surface	NOUN
fumecheng-7188	237	19	and	and	CCONJ
fumecheng-7188	237	20	curves	curve	NOUN
fumecheng-7188	237	21	:	:	PUNCT
fumecheng-7188	237	22	theory	theory	NOUN
fumecheng-7188	237	23	and	and	CCONJ
fumecheng-7188	237	24	algorithm	algorithm	NOUN
fumecheng-7188	237	25	,	,	PUNCT
fumecheng-7188	237	26	international	international	ADJ
fumecheng-7188	237	27	journal	journal	NOUN
fumecheng-7188	237	28	of	of	ADP
fumecheng-7188	237	29	machine	machine	NOUN
fumecheng-7188	237	30	tools	tool	NOUN
fumecheng-7188	237	31	and	and	CCONJ
fumecheng-7188	237	32	manufacture	manufacture	NOUN
fumecheng-7188	237	33	,	,	PUNCT
fumecheng-7188	237	34	30(3	30(3	NUM
fumecheng-7188	237	35	)	)	PUNCT
fumecheng-7188	237	36	,	,	PUNCT
fumecheng-7188	237	37	pp	pp	ADJ
fumecheng-7188	237	38	.	.	PUNCT
fumecheng-7188	238	1	339	339	NUM
fumecheng-7188	238	2	-	-	SYM
fumecheng-7188	238	3	357	357	NUM
fumecheng-7188	238	4	.	.	NOUN
fumecheng-7188	238	5	8	8	NUM
fumecheng-7188	238	6	.	.	X
fumecheng-7188	239	1	lou	lou	PROPN
fumecheng-7188	239	2	,	,	PUNCT
fumecheng-7188	239	3	s.	s.	PROPN
fumecheng-7188	239	4	,	,	PUNCT
fumecheng-7188	239	5	brown	brown	PROPN
fumecheng-7188	239	6	,	,	PUNCT
fumecheng-7188	239	7	s.b	s.b	PROPN
fumecheng-7188	239	8	.	.	PROPN
fumecheng-7188	239	9	,	,	PUNCT
fumecheng-7188	239	10	sun	sun	PROPN
fumecheng-7188	239	11	,	,	PUNCT
fumecheng-7188	239	12	w.	w.	PROPN
fumecheng-7188	239	13	,	,	PUNCT
fumecheng-7188	239	14	zeng	zeng	PROPN
fumecheng-7188	239	15	,	,	PUNCT
fumecheng-7188	239	16	w.	w.	PROPN
fumecheng-7188	239	17	,	,	PUNCT
fumecheng-7188	239	18	jiang	jiang	PROPN
fumecheng-7188	239	19	,	,	PUNCT
fumecheng-7188	239	20	x.	x.	PROPN
fumecheng-7188	239	21	,	,	PUNCT
fumecheng-7188	239	22	scott	scott	PROPN
fumecheng-7188	239	23	,	,	PUNCT
fumecheng-7188	239	24	p.j	p.j	PROPN
fumecheng-7188	239	25	.	.	PROPN
fumecheng-7188	239	26	,	,	PUNCT
fumecheng-7188	239	27	2019	2019	NUM
fumecheng-7188	239	28	,	,	PUNCT
fumecheng-7188	239	29	an	an	DET
fumecheng-7188	239	30	investigation	investigation	NOUN
fumecheng-7188	239	31	of	of	ADP
fumecheng-7188	239	32	the	the	DET
fumecheng-7188	239	33	mechanical	mechanical	ADJ
fumecheng-7188	239	34	filtering	filtering	NOUN
fumecheng-7188	239	35	effect	effect	NOUN
fumecheng-7188	239	36	of	of	ADP
fumecheng-7188	239	37	tactile	tactile	ADJ
fumecheng-7188	239	38	cmm	cmm	NOUN
fumecheng-7188	239	39	in	in	ADP
fumecheng-7188	239	40	the	the	DET
fumecheng-7188	239	41	measurement	measurement	NOUN
fumecheng-7188	239	42	of	of	ADP
fumecheng-7188	239	43	additively	additively	ADV
fumecheng-7188	239	44	manufactured	manufacture	VERB
fumecheng-7188	239	45	parts	part	NOUN
fumecheng-7188	239	46	,	,	PUNCT
fumecheng-7188	239	47	measurement	measurement	NOUN
fumecheng-7188	239	48	,	,	PUNCT
fumecheng-7188	239	49	144	144	NUM
fumecheng-7188	239	50	,	,	PUNCT
fumecheng-7188	239	51	pp	pp	ADJ
fumecheng-7188	239	52	.	.	PUNCT
fumecheng-7188	240	1	173	173	NUM
fumecheng-7188	240	2	-	-	SYM
fumecheng-7188	240	3	182	182	NUM
fumecheng-7188	240	4	.	.	PUNCT
fumecheng-7188	241	1	9	9	NUM
fumecheng-7188	241	2	.	.	X
fumecheng-7188	241	3	menq	menq	PROPN
fumecheng-7188	241	4	,	,	PUNCT
fumecheng-7188	241	5	c.	c.	PROPN
fumecheng-7188	241	6	,	,	PUNCT
fumecheng-7188	241	7	chen	chen	PROPN
fumecheng-7188	241	8	,	,	PUNCT
fumecheng-7188	241	9	f.l	f.l	PROPN
fumecheng-7188	241	10	.	.	PROPN
fumecheng-7188	241	11	,	,	PUNCT
fumecheng-7188	241	12	1996	1996	NUM
fumecheng-7188	241	13	,	,	PUNCT
fumecheng-7188	241	14	curve	curve	NOUN
fumecheng-7188	241	15	and	and	CCONJ
fumecheng-7188	241	16	surface	surface	NOUN
fumecheng-7188	241	17	approximation	approximation	NOUN
fumecheng-7188	241	18	from	from	ADP
fumecheng-7188	241	19	cmm	cmm	PROPN
fumecheng-7188	241	20	measurement	measurement	PROPN
fumecheng-7188	241	21	data	data	PROPN
fumecheng-7188	241	22	,	,	PUNCT
fumecheng-7188	241	23	computers	computer	NOUN
fumecheng-7188	241	24	ind	ind	NOUN
fumecheng-7188	241	25	.	.	PUNCT
fumecheng-7188	242	1	engng	engng	PROPN
fumecheng-7188	242	2	,	,	PUNCT
fumecheng-7188	242	3	30(2	30(2	NUM
fumecheng-7188	242	4	)	)	PUNCT
fumecheng-7188	242	5	,	,	PUNCT
fumecheng-7188	242	6	pp	pp	PROPN
fumecheng-7188	242	7	.	.	PUNCT
fumecheng-7188	243	1	211	211	NUM
fumecheng-7188	243	2	-	-	SYM
fumecheng-7188	243	3	225	225	NUM
fumecheng-7188	243	4	.	.	PUNCT
fumecheng-7188	244	1	10	10	NUM
fumecheng-7188	244	2	.	.	PUNCT
fumecheng-7188	245	1	lin	lin	PROPN
fumecheng-7188	245	2	,	,	PUNCT
fumecheng-7188	245	3	h.	h.	PROPN
fumecheng-7188	245	4	,	,	PUNCT
fumecheng-7188	245	5	keller	keller	PROPN
fumecheng-7188	245	6	,	,	PUNCT
fumecheng-7188	245	7	f.	f.	PROPN
fumecheng-7188	245	8	,	,	PUNCT
fumecheng-7188	245	9	stein	stein	PROPN
fumecheng-7188	245	10	,	,	PUNCT
fumecheng-7188	245	11	m.	m.	NOUN
fumecheng-7188	245	12	,	,	PUNCT
fumecheng-7188	245	13	2020	2020	NUM
fumecheng-7188	245	14	,	,	PUNCT
fumecheng-7188	245	15	influence	influence	NOUN
fumecheng-7188	245	16	and	and	CCONJ
fumecheng-7188	245	17	compensation	compensation	NOUN
fumecheng-7188	245	18	of	of	ADP
fumecheng-7188	245	19	cmm	cmm	PROPN
fumecheng-7188	245	20	geometric	geometric	ADJ
fumecheng-7188	245	21	errors	error	NOUN
fumecheng-7188	245	22	on	on	ADP
fumecheng-7188	245	23	3d	3d	NUM
fumecheng-7188	245	24	gear	gear	NOUN
fumecheng-7188	245	25	measurements	measurement	NOUN
fumecheng-7188	245	26	,	,	PUNCT
fumecheng-7188	245	27	measurement	measurement	NOUN
fumecheng-7188	245	28	,	,	PUNCT
fumecheng-7188	245	29	151	151	NUM
fumecheng-7188	245	30	,	,	PUNCT
fumecheng-7188	245	31	article	article	NOUN
fumecheng-7188	245	32	107110	107110	NUM
fumecheng-7188	245	33	.	.	PUNCT
fumecheng-7188	246	1	11	11	NUM
fumecheng-7188	246	2	.	.	X
fumecheng-7188	247	1	ding	ding	NOUN
fumecheng-7188	247	2	,	,	PUNCT
fumecheng-7188	247	3	d.	d.	PROPN
fumecheng-7188	247	4	,	,	PUNCT
fumecheng-7188	247	5	zhao	zhao	PROPN
fumecheng-7188	247	6	,	,	PUNCT
fumecheng-7188	247	7	z.	z.	PROPN
fumecheng-7188	247	8	,	,	PUNCT
fumecheng-7188	247	9	zhang	zhang	PROPN
fumecheng-7188	247	10	,	,	PUNCT
fumecheng-7188	247	11	x.	x.	PROPN
fumecheng-7188	247	12	,	,	PUNCT
fumecheng-7188	247	13	fu	fu	PROPN
fumecheng-7188	247	14	,	,	PUNCT
fumecheng-7188	247	15	y.	y.	PROPN
fumecheng-7188	247	16	,	,	PUNCT
fumecheng-7188	247	17	xu	xu	PROPN
fumecheng-7188	247	18	,	,	PUNCT
fumecheng-7188	247	19	j.	j.	PROPN
fumecheng-7188	247	20	,	,	PUNCT
fumecheng-7188	247	21	2020	2020	NUM
fumecheng-7188	247	22	,	,	PUNCT
fumecheng-7188	247	23	evaluation	evaluation	NOUN
fumecheng-7188	247	24	and	and	CCONJ
fumecheng-7188	247	25	compensation	compensation	NOUN
fumecheng-7188	247	26	of	of	ADP
fumecheng-7188	247	27	laser	laser	NOUN
fumecheng-7188	247	28	-	-	PUNCT
fumecheng-7188	247	29	based	base	VERB
fumecheng-7188	247	30	on	on	ADP
fumecheng-7188	247	31	-	-	PUNCT
fumecheng-7188	247	32	machine	machine	NOUN
fumecheng-7188	247	33	measurement	measurement	NOUN
fumecheng-7188	247	34	for	for	ADP
fumecheng-7188	247	35	inclined	inclined	ADJ
fumecheng-7188	247	36	and	and	CCONJ
fumecheng-7188	247	37	curved	curved	ADJ
fumecheng-7188	247	38	profiles	profile	NOUN
fumecheng-7188	247	39	,	,	PUNCT
fumecheng-7188	247	40	measurement	measurement	NOUN
fumecheng-7188	247	41	,	,	PUNCT
fumecheng-7188	247	42	151	151	NUM
fumecheng-7188	247	43	,	,	PUNCT
fumecheng-7188	247	44	article	article	NOUN
fumecheng-7188	247	45	107236	107236	NUM
fumecheng-7188	247	46	.	.	PUNCT
fumecheng-7188	248	1	12	12	NUM
fumecheng-7188	248	2	.	.	PUNCT
fumecheng-7188	249	1	adam	adam	PROPN
fumecheng-7188	249	2	wozniak	wozniak	PROPN
fumecheng-7188	249	3	,	,	PUNCT
fumecheng-7188	249	4	a.	a.	PROPN
fumecheng-7188	249	5	,	,	PUNCT
fumecheng-7188	249	6	krajewski	krajewski	PROPN
fumecheng-7188	249	7	,	,	PUNCT
fumecheng-7188	249	8	g.	g.	PROPN
fumecheng-7188	249	9	,	,	PUNCT
fumecheng-7188	249	10	byszewski	byszewski	NOUN
fumecheng-7188	249	11	,	,	PUNCT
fumecheng-7188	249	12	m.	m.	NOUN
fumecheng-7188	249	13	,	,	PUNCT
fumecheng-7188	249	14	2019	2019	NUM
fumecheng-7188	249	15	,	,	PUNCT
fumecheng-7188	249	16	a	a	DET
fumecheng-7188	249	17	new	new	ADJ
fumecheng-7188	249	18	method	method	NOUN
fumecheng-7188	249	19	for	for	ADP
fumecheng-7188	249	20	examining	examine	VERB
fumecheng-7188	249	21	the	the	DET
fumecheng-7188	249	22	dynamic	dynamic	ADJ
fumecheng-7188	249	23	performance	performance	NOUN
fumecheng-7188	249	24	of	of	ADP
fumecheng-7188	249	25	coordinate	coordinate	ADJ
fumecheng-7188	249	26	measuring	measure	VERB
fumecheng-7188	249	27	machines	machine	NOUN
fumecheng-7188	249	28	,	,	PUNCT
fumecheng-7188	249	29	measurement	measurement	NOUN
fumecheng-7188	249	30	,	,	PUNCT
fumecheng-7188	249	31	134	134	NUM
fumecheng-7188	249	32	,	,	PUNCT
fumecheng-7188	249	33	pp	pp	ADJ
fumecheng-7188	249	34	.	.	PUNCT
fumecheng-7188	249	35	814	814	NUM
fumecheng-7188	249	36	-	-	SYM
fumecheng-7188	249	37	819	819	NUM
fumecheng-7188	249	38	.	.	NOUN
fumecheng-7188	249	39	13	13	NUM
fumecheng-7188	249	40	.	.	PUNCT
fumecheng-7188	250	1	zhang	zhang	PROPN
fumecheng-7188	250	2	y.	y.	PROPN
fumecheng-7188	250	3	,	,	PUNCT
fumecheng-7188	250	4	chen	chen	PROPN
fumecheng-7188	250	5	,	,	PUNCT
fumecheng-7188	250	6	z.	z.	PROPN
fumecheng-7188	250	7	,	,	PUNCT
fumecheng-7188	250	8	zhu	zhu	PROPN
fumecheng-7188	250	9	,	,	PUNCT
fumecheng-7188	250	10	z.	z.	PROPN
fumecheng-7188	250	11	,	,	PUNCT
fumecheng-7188	250	12	wang	wang	PROPN
fumecheng-7188	250	13	,	,	PUNCT
fumecheng-7188	250	14	x.	x.	PROPN
fumecheng-7188	250	15	,	,	PUNCT
fumecheng-7188	250	16	2020	2020	NUM
fumecheng-7188	250	17	,	,	PUNCT
fumecheng-7188	250	18	a	a	DET
fumecheng-7188	250	19	sampling	sampling	NOUN
fumecheng-7188	250	20	method	method	NOUN
fumecheng-7188	250	21	for	for	ADP
fumecheng-7188	250	22	blade	blade	NOUN
fumecheng-7188	250	23	measurement	measurement	NOUN
fumecheng-7188	250	24	based	base	VERB
fumecheng-7188	250	25	on	on	ADP
fumecheng-7188	250	26	statistical	statistical	ADJ
fumecheng-7188	250	27	analysis	analysis	NOUN
fumecheng-7188	250	28	of	of	ADP
fumecheng-7188	250	29	profile	profile	NOUN
fumecheng-7188	250	30	deviations	deviation	NOUN
fumecheng-7188	250	31	,	,	PUNCT
fumecheng-7188	250	32	measurement	measurement	NOUN
fumecheng-7188	250	33	,	,	PUNCT
fumecheng-7188	250	34	163	163	NUM
fumecheng-7188	250	35	,	,	PUNCT
fumecheng-7188	250	36	article	article	NOUN
fumecheng-7188	250	37	107949	107949	NUM
fumecheng-7188	250	38	.	.	PUNCT
fumecheng-7188	251	1	14	14	NUM
fumecheng-7188	251	2	.	.	PUNCT
fumecheng-7188	252	1	dhanish	dhanish	PROPN
fumecheng-7188	252	2	,	,	PUNCT
fumecheng-7188	252	3	p.b	p.b	PROPN
fumecheng-7188	252	4	.	.	PROPN
fumecheng-7188	252	5	,	,	PUNCT
fumecheng-7188	252	6	mathew	mathew	PROPN
fumecheng-7188	252	7	,	,	PUNCT
fumecheng-7188	252	8	j.	j.	PROPN
fumecheng-7188	252	9	,	,	PUNCT
fumecheng-7188	252	10	2006	2006	NUM
fumecheng-7188	252	11	,	,	PUNCT
fumecheng-7188	252	12	effect	effect	NOUN
fumecheng-7188	252	13	of	of	ADP
fumecheng-7188	252	14	cmm	cmm	PROPN
fumecheng-7188	252	15	point	point	NOUN
fumecheng-7188	252	16	coordinate	coordinate	NOUN
fumecheng-7188	252	17	uncertainty	uncertainty	NOUN
fumecheng-7188	252	18	on	on	ADP
fumecheng-7188	252	19	uncertainties	uncertainty	NOUN
fumecheng-7188	252	20	in	in	ADP
fumecheng-7188	252	21	determination	determination	NOUN
fumecheng-7188	252	22	of	of	ADP
fumecheng-7188	252	23	circular	circular	ADJ
fumecheng-7188	252	24	features	feature	NOUN
fumecheng-7188	252	25	,	,	PUNCT
fumecheng-7188	252	26	measurement	measurement	NOUN
fumecheng-7188	252	27	,	,	PUNCT
fumecheng-7188	252	28	39(6	39(6	NOUN
fumecheng-7188	252	29	)	)	PUNCT
fumecheng-7188	252	30	,	,	PUNCT
fumecheng-7188	252	31	pp	pp	ADJ
fumecheng-7188	252	32	.	.	PUNCT
fumecheng-7188	253	1	522	522	NUM
fumecheng-7188	253	2	-	-	SYM
fumecheng-7188	253	3	531	531	NUM
fumecheng-7188	253	4	.	.	PUNCT
fumecheng-7188	254	1	15	15	NUM
fumecheng-7188	254	2	.	.	PUNCT
fumecheng-7188	255	1	kubátová	kubátová	PROPN
fumecheng-7188	255	2	,	,	PUNCT
fumecheng-7188	255	3	d.	d.	PROPN
fumecheng-7188	255	4	,	,	PUNCT
fumecheng-7188	255	5	melichar	melichar	PROPN
fumecheng-7188	255	6	,	,	PUNCT
fumecheng-7188	255	7	m.	m.	NOUN
fumecheng-7188	255	8	,	,	PUNCT
fumecheng-7188	255	9	kutlwašer	kutlwašer	PROPN
fumecheng-7188	255	10	,	,	PUNCT
fumecheng-7188	255	11	j.	j.	PROPN
fumecheng-7188	255	12	,	,	PUNCT
fumecheng-7188	255	13	2017	2017	NUM
fumecheng-7188	255	14	,	,	PUNCT
fumecheng-7188	255	15	evaluation	evaluation	NOUN
fumecheng-7188	255	16	of	of	ADP
fumecheng-7188	255	17	repeatability	repeatability	NOUN
fumecheng-7188	255	18	and	and	CCONJ
fumecheng-7188	255	19	reproducibility	reproducibility	NOUN
fumecheng-7188	255	20	of	of	ADP
fumecheng-7188	255	21	cmm	cmm	PROPN
fumecheng-7188	255	22	equipment	equipment	PROPN
fumecheng-7188	255	23	,	,	PUNCT
fumecheng-7188	255	24	procedia	procedia	NOUN
fumecheng-7188	255	25	manufacturing	manufacturing	NOUN
fumecheng-7188	255	26	,	,	PUNCT
fumecheng-7188	255	27	13	13	NUM
fumecheng-7188	255	28	,	,	PUNCT
fumecheng-7188	255	29	pp	pp	ADJ
fumecheng-7188	255	30	.	.	PUNCT
fumecheng-7188	256	1	558	558	NUM
fumecheng-7188	256	2	-	-	SYM
fumecheng-7188	256	3	564	564	NUM
fumecheng-7188	256	4	.	.	PUNCT
fumecheng-7188	257	1	16	16	NUM
fumecheng-7188	257	2	.	.	PUNCT
fumecheng-7188	258	1	raja	raja	PROPN
fumecheng-7188	258	2	,	,	PUNCT
fumecheng-7188	258	3	j.	j.	PROPN
fumecheng-7188	258	4	,	,	PUNCT
fumecheng-7188	258	5	muralikrishnan	muralikrishnan	PROPN
fumecheng-7188	258	6	,	,	PUNCT
fumecheng-7188	258	7	b.	b.	PROPN
fumecheng-7188	258	8	,	,	PUNCT
fumecheng-7188	258	9	fu	fu	PROPN
fumecheng-7188	258	10	,	,	PUNCT
fumecheng-7188	258	11	s.	s.	PROPN
fumecheng-7188	258	12	,	,	PUNCT
fumecheng-7188	258	13	2002	2002	NUM
fumecheng-7188	258	14	,	,	PUNCT
fumecheng-7188	258	15	recent	recent	ADJ
fumecheng-7188	258	16	advances	advance	NOUN
fumecheng-7188	258	17	in	in	ADP
fumecheng-7188	258	18	separation	separation	NOUN
fumecheng-7188	258	19	of	of	ADP
fumecheng-7188	258	20	roughness	roughness	NOUN
fumecheng-7188	258	21	,	,	PUNCT
fumecheng-7188	258	22	waviness	waviness	NOUN
fumecheng-7188	258	23	and	and	CCONJ
fumecheng-7188	258	24	form	form	NOUN
fumecheng-7188	258	25	,	,	PUNCT
fumecheng-7188	258	26	precision	precision	NOUN
fumecheng-7188	258	27	engineering	engineering	NOUN
fumecheng-7188	258	28	,	,	PUNCT
fumecheng-7188	258	29	26(2	26(2	NUM
fumecheng-7188	258	30	)	)	PUNCT
fumecheng-7188	258	31	,	,	PUNCT
fumecheng-7188	258	32	pp	pp	PROPN
fumecheng-7188	258	33	.	.	PUNCT
fumecheng-7188	259	1	222	222	NUM
fumecheng-7188	259	2	-	-	SYM
fumecheng-7188	259	3	235	235	NUM
fumecheng-7188	259	4	.	.	PUNCT
fumecheng-7188	260	1	17	17	NUM
fumecheng-7188	260	2	.	.	PUNCT
fumecheng-7188	261	1	raghu	raghu	PROPN
fumecheng-7188	261	2	,	,	PUNCT
fumecheng-7188	261	3	s.	s.	PROPN
fumecheng-7188	261	4	,	,	PUNCT
fumecheng-7188	261	5	mamatha	mamatha	PROPN
fumecheng-7188	261	6	,	,	PUNCT
fumecheng-7188	261	7	t.g	t.g	PROPN
fumecheng-7188	261	8	.	.	PROPN
fumecheng-7188	261	9	,	,	PUNCT
fumecheng-7188	261	10	pali	pali	PROPN
fumecheng-7188	261	11	,	,	PUNCT
fumecheng-7188	261	12	h.s	h.s	PROPN
fumecheng-7188	261	13	.	.	PROPN
fumecheng-7188	261	14	,	,	PUNCT
fumecheng-7188	261	15	sharma	sharma	PROPN
fumecheng-7188	261	16	,	,	PUNCT
fumecheng-7188	261	17	r.	r.	PROPN
fumecheng-7188	261	18	,	,	PUNCT
fumecheng-7188	261	19	vimal	vimal	PROPN
fumecheng-7188	261	20	,	,	PUNCT
fumecheng-7188	261	21	j.r	j.r	PROPN
fumecheng-7188	261	22	.	.	PROPN
fumecheng-7188	261	23	,	,	PUNCT
fumecheng-7188	261	24	kumar	kumar	PROPN
fumecheng-7188	261	25	v.	v.	PROPN
fumecheng-7188	261	26	,	,	PUNCT
fumecheng-7188	261	27	2020	2020	NUM
fumecheng-7188	261	28	,	,	PUNCT
fumecheng-7188	261	29	a	a	DET
fumecheng-7188	261	30	comparative	comparative	ADJ
fumecheng-7188	261	31	study	study	NOUN
fumecheng-7188	261	32	of	of	ADP
fumecheng-7188	261	33	circularity	circularity	NOUN
fumecheng-7188	261	34	of	of	ADP
fumecheng-7188	261	35	artefact	artefact	ADJ
fumecheng-7188	261	36	detecting	detect	VERB
fumecheng-7188	261	37	circle	circle	NOUN
fumecheng-7188	261	38	using	use	VERB
fumecheng-7188	261	39	cmm	cmm	NOUN
fumecheng-7188	261	40	and	and	CCONJ
fumecheng-7188	261	41	form	form	VERB
fumecheng-7188	261	42	tester	tester	NOUN
fumecheng-7188	261	43	with	with	ADP
fumecheng-7188	261	44	different	different	ADJ
fumecheng-7188	261	45	filters	filter	NOUN
fumecheng-7188	261	46	,	,	PUNCT
fumecheng-7188	261	47	materials	material	NOUN
fumecheng-7188	261	48	today	today	NOUN
fumecheng-7188	261	49	:	:	PUNCT
fumecheng-7188	261	50	proceedings	proceeding	NOUN
fumecheng-7188	261	51	,	,	PUNCT
fumecheng-7188	261	52	25(4	25(4	NOUN
fumecheng-7188	261	53	)	)	PUNCT
fumecheng-7188	261	54	,	,	PUNCT
fumecheng-7188	261	55	pp	pp	PROPN
fumecheng-7188	261	56	.	.	PUNCT
fumecheng-7188	262	1	821	821	NUM
fumecheng-7188	262	2	-	-	SYM
fumecheng-7188	262	3	826	826	NUM
fumecheng-7188	262	4	.	.	PUNCT
fumecheng-7188	263	1	accuracy	accuracy	NOUN
fumecheng-7188	263	2	analysis	analysis	NOUN
fumecheng-7188	263	3	of	of	ADP
fumecheng-7188	263	4	the	the	DET
fumecheng-7188	263	5	curved	curved	ADJ
fumecheng-7188	263	6	profile	profile	PROPN
fumecheng-7188	263	7	measurement	measurement	NOUN
fumecheng-7188	263	8	with	with	ADP
fumecheng-7188	263	9	cmm	cmm	NOUN
fumecheng-7188	263	10	:	:	PUNCT
fumecheng-7188	263	11	a	a	DET
fumecheng-7188	263	12	case	case	NOUN
fumecheng-7188	263	13	study	study	NOUN
fumecheng-7188	263	14	135	135	NUM
fumecheng-7188	263	15	18	18	NUM
fumecheng-7188	263	16	.	.	PUNCT
fumecheng-7188	264	1	kalish	kalish	PROPN
fumecheng-7188	264	2	,	,	PUNCT
fumecheng-7188	264	3	n.	n.	PROPN
fumecheng-7188	264	4	j.	j.	PROPN
fumecheng-7188	264	5	,	,	PUNCT
fumecheng-7188	264	6	davidson	davidson	PROPN
fumecheng-7188	264	7	,	,	PUNCT
fumecheng-7188	264	8	j.	j.	PROPN
fumecheng-7188	264	9	k.	k.	PROPN
fumecheng-7188	264	10	,	,	PUNCT
fumecheng-7188	264	11	shah	shah	PROPN
fumecheng-7188	264	12	,	,	PUNCT
fumecheng-7188	264	13	j.j	j.j	PROPN
fumecheng-7188	264	14	.	.	PROPN
fumecheng-7188	264	15	,	,	PUNCT
fumecheng-7188	264	16	2020	2020	NUM
fumecheng-7188	264	17	,	,	PUNCT
fumecheng-7188	264	18	constructive	constructive	ADJ
fumecheng-7188	264	19	statistics	statistic	NOUN
fumecheng-7188	264	20	and	and	CCONJ
fumecheng-7188	264	21	virtual	virtual	ADJ
fumecheng-7188	264	22	capture	capture	NOUN
fumecheng-7188	264	23	zones	zone	NOUN
fumecheng-7188	264	24	:	:	PUNCT
fumecheng-7188	264	25	a	a	DET
fumecheng-7188	264	26	novel	novel	ADJ
fumecheng-7188	264	27	math	math	NOUN
fumecheng-7188	264	28	model	model	NOUN
fumecheng-7188	264	29	for	for	ADP
fumecheng-7188	264	30	cmm	cmm	PROPN
fumecheng-7188	264	31	metrology	metrology	PROPN
fumecheng-7188	264	32	,	,	PUNCT
fumecheng-7188	264	33	procedia	procedia	NOUN
fumecheng-7188	264	34	cirp	cirp	NOUN
fumecheng-7188	264	35	,	,	PUNCT
fumecheng-7188	264	36	92	92	NUM
fumecheng-7188	264	37	,	,	PUNCT
fumecheng-7188	264	38	pp	pp	ADJ
fumecheng-7188	264	39	.	.	PUNCT
fumecheng-7188	265	1	39	39	NUM
fumecheng-7188	265	2	-	-	SYM
fumecheng-7188	265	3	44	44	NUM
fumecheng-7188	265	4	.	.	PUNCT
fumecheng-7188	266	1	19	19	NUM
fumecheng-7188	266	2	.	.	PUNCT
fumecheng-7188	267	1	he	he	PRON
fumecheng-7188	267	2	,	,	PUNCT
fumecheng-7188	267	3	g.	g.	PROPN
fumecheng-7188	267	4	,	,	PUNCT
fumecheng-7188	267	5	sang	sing	VERB
fumecheng-7188	267	6	,	,	PUNCT
fumecheng-7188	267	7	y.	y.	PROPN
fumecheng-7188	267	8	,	,	PUNCT
fumecheng-7188	267	9	wang	wang	PROPN
fumecheng-7188	267	10	,	,	PUNCT
fumecheng-7188	267	11	h.	h.	PROPN
fumecheng-7188	267	12	,	,	PUNCT
fumecheng-7188	267	13	sun	sun	PROPN
fumecheng-7188	267	14	,	,	PUNCT
fumecheng-7188	267	15	g.	g.	PROPN
fumecheng-7188	267	16	,	,	PUNCT
fumecheng-7188	267	17	2019	2019	NUM
fumecheng-7188	267	18	,	,	PUNCT
fumecheng-7188	267	19	a	a	DET
fumecheng-7188	267	20	profile	profile	NOUN
fumecheng-7188	267	21	error	error	NOUN
fumecheng-7188	267	22	evaluation	evaluation	NOUN
fumecheng-7188	267	23	method	method	NOUN
fumecheng-7188	267	24	for	for	ADP
fumecheng-7188	267	25	freeform	freeform	ADJ
fumecheng-7188	267	26	surface	surface	NOUN
fumecheng-7188	267	27	measured	measure	VERB
fumecheng-7188	267	28	by	by	ADP
fumecheng-7188	267	29	sweep	sweep	NOUN
fumecheng-7188	267	30	scanning	scanning	NOUN
fumecheng-7188	267	31	on	on	ADP
fumecheng-7188	267	32	cmm	cmm	NOUN
fumecheng-7188	267	33	,	,	PUNCT
fumecheng-7188	267	34	precision	precision	NOUN
fumecheng-7188	267	35	engineering	engineering	NOUN
fumecheng-7188	267	36	,	,	PUNCT
fumecheng-7188	267	37	56	56	NUM
fumecheng-7188	267	38	,	,	PUNCT
fumecheng-7188	267	39	pp	pp	ADJ
fumecheng-7188	267	40	.	.	PUNCT
fumecheng-7188	268	1	280	280	NUM
fumecheng-7188	268	2	-	-	SYM
fumecheng-7188	268	3	292	292	NUM
fumecheng-7188	268	4	.	.	PUNCT
fumecheng-7188	269	1	20	20	NUM
fumecheng-7188	269	2	.	.	PUNCT
fumecheng-7188	270	1	gąska	gąska	PROPN
fumecheng-7188	270	2	,	,	PUNCT
fumecheng-7188	270	3	a.	a.	PROPN
fumecheng-7188	270	4	,	,	PUNCT
fumecheng-7188	270	5	harmatys	harmatys	PROPN
fumecheng-7188	270	6	,	,	PUNCT
fumecheng-7188	270	7	w.	w.	PROPN
fumecheng-7188	270	8	,	,	PUNCT
fumecheng-7188	270	9	gąska	gąska	PROPN
fumecheng-7188	270	10	,	,	PUNCT
fumecheng-7188	270	11	p.	p.	PROPN
fumecheng-7188	270	12	,	,	PUNCT
fumecheng-7188	270	13	gruza	gruza	PROPN
fumecheng-7188	270	14	,	,	PUNCT
fumecheng-7188	270	15	m.	m.	NOUN
fumecheng-7188	270	16	,	,	PUNCT
fumecheng-7188	270	17	gromczak	gromczak	NOUN
fumecheng-7188	270	18	,	,	PUNCT
fumecheng-7188	270	19	k.	k.	PROPN
fumecheng-7188	270	20	,	,	PUNCT
fumecheng-7188	270	21	ostrowska	ostrowska	PROPN
fumecheng-7188	270	22	,	,	PUNCT
fumecheng-7188	270	23	k.	k.	PROPN
fumecheng-7188	270	24	,	,	PUNCT
fumecheng-7188	270	25	2017	2017	NUM
fumecheng-7188	270	26	,	,	PUNCT
fumecheng-7188	270	27	virtual	virtual	ADJ
fumecheng-7188	270	28	cmm	cmm	NOUN
fumecheng-7188	270	29	-	-	PUNCT
fumecheng-7188	270	30	based	base	VERB
fumecheng-7188	270	31	model	model	NOUN
fumecheng-7188	270	32	for	for	ADP
fumecheng-7188	270	33	uncertainty	uncertainty	NOUN
fumecheng-7188	270	34	estimation	estimation	NOUN
fumecheng-7188	270	35	of	of	ADP
fumecheng-7188	270	36	coordinate	coordinate	NOUN
fumecheng-7188	270	37	measurements	measurement	NOUN
fumecheng-7188	270	38	performed	perform	VERB
fumecheng-7188	270	39	in	in	ADP
fumecheng-7188	270	40	industrial	industrial	ADJ
fumecheng-7188	270	41	conditions	condition	NOUN
fumecheng-7188	270	42	,	,	PUNCT
fumecheng-7188	270	43	measurement	measurement	NOUN
fumecheng-7188	270	44	,	,	PUNCT
fumecheng-7188	270	45	98	98	NUM
fumecheng-7188	270	46	,	,	PUNCT
fumecheng-7188	270	47	pp	pp	ADJ
fumecheng-7188	270	48	.	.	PUNCT
fumecheng-7188	271	1	361	361	NUM
fumecheng-7188	271	2	-	-	SYM
fumecheng-7188	271	3	371	371	NUM
fumecheng-7188	271	4	.	.	PUNCT
fumecheng-7188	272	1	21	21	NUM
fumecheng-7188	272	2	.	.	X
fumecheng-7188	273	1	zhou	zhou	PROPN
fumecheng-7188	273	2	,	,	PUNCT
fumecheng-7188	273	3	z.	z.	PROPN
fumecheng-7188	273	4	,	,	PUNCT
fumecheng-7188	273	5	zhang	zhang	PROPN
fumecheng-7188	273	6	,	,	PUNCT
fumecheng-7188	273	7	y.	y.	PROPN
fumecheng-7188	273	8	,	,	PUNCT
fumecheng-7188	273	9	tang	tang	PROPN
fumecheng-7188	273	10	,	,	PUNCT
fumecheng-7188	273	11	k.	k.	PROPN
fumecheng-7188	273	12	,	,	PUNCT
fumecheng-7188	273	13	2016	2016	NUM
fumecheng-7188	273	14	,	,	PUNCT
fumecheng-7188	273	15	sweep	sweep	VERB
fumecheng-7188	273	16	scan	scan	PROPN
fumecheng-7188	273	17	path	path	PROPN
fumecheng-7188	273	18	planning	planning	NOUN
fumecheng-7188	273	19	for	for	ADP
fumecheng-7188	273	20	efficient	efficient	ADJ
fumecheng-7188	273	21	freeform	freeform	NOUN
fumecheng-7188	273	22	surface	surface	NOUN
fumecheng-7188	273	23	inspection	inspection	NOUN
fumecheng-7188	273	24	on	on	ADP
fumecheng-7188	273	25	five	five	NUM
fumecheng-7188	273	26	-	-	PUNCT
fumecheng-7188	273	27	axis	axis	NOUN
fumecheng-7188	273	28	cmm	cmm	NOUN
fumecheng-7188	273	29	,	,	PUNCT
fumecheng-7188	273	30	computer	computer	NOUN
fumecheng-7188	273	31	-	-	PUNCT
fumecheng-7188	273	32	aided	aid	VERB
fumecheng-7188	273	33	design	design	NOUN
fumecheng-7188	273	34	,	,	PUNCT
fumecheng-7188	273	35	77	77	NUM
fumecheng-7188	273	36	,	,	PUNCT
fumecheng-7188	273	37	pp	pp	ADJ
fumecheng-7188	273	38	.	.	PUNCT
fumecheng-7188	274	1	1	1	NUM
fumecheng-7188	274	2	-	-	SYM
fumecheng-7188	274	3	17	17	NUM
fumecheng-7188	274	4	.	.	PUNCT
fumecheng-7188	275	1	22	22	NUM
fumecheng-7188	275	2	.	.	PUNCT
fumecheng-7188	276	1	oxford	oxford	PROPN
fumecheng-7188	276	2	english	english	PROPN
fumecheng-7188	276	3	dictionary	dictionary	PROPN
fumecheng-7188	276	4	.	.	PUNCT
fumecheng-7188	277	1	oxford	oxford	PROPN
fumecheng-7188	277	2	university	university	PROPN
fumecheng-7188	277	3	press	press	NOUN
fumecheng-7188	277	4	.	.	PUNCT
fumecheng-7188	278	1	(	(	PUNCT
fumecheng-7188	278	2	2013	2013	NUM
fumecheng-7188	278	3	)	)	PUNCT
fumecheng-7188	278	4	consistency	consistency	NOUN
fumecheng-7188	278	5	,	,	PUNCT
fumecheng-7188	278	6	n.	n.	PROPN
fumecheng-7188	278	7	oed	oed	PROPN
fumecheng-7188	278	8	online	online	ADV
fumecheng-7188	278	9	.	.	PUNCT
fumecheng-7188	279	1	retrieved	retrieve	VERB
fumecheng-7188	279	2	december	december	PROPN
fumecheng-7188	279	3	17	17	NUM
fumecheng-7188	279	4	,	,	PUNCT
fumecheng-7188	279	5	2013	2013	NUM
fumecheng-7188	279	6	,	,	PUNCT
fumecheng-7188	279	7	from	from	ADP
fumecheng-7188	279	8	http://www.oed.com	http://www.oed.com	PROPN
fumecheng-7188	279	9	23	23	NUM
fumecheng-7188	279	10	.	.	PUNCT
fumecheng-7188	280	1	saunders	saunder	NOUN
fumecheng-7188	280	2	,	,	PUNCT
fumecheng-7188	280	3	p.	p.	PROPN
fumecheng-7188	280	4	,	,	PUNCT
fumecheng-7188	280	5	wilson	wilson	PROPN
fumecheng-7188	280	6	,	,	PUNCT
fumecheng-7188	280	7	a.	a.	NOUN
fumecheng-7188	280	8	,	,	PUNCT
fumecheng-7188	280	9	orchard	orchard	NOUN
fumecheng-7188	280	10	,	,	PUNCT
fumecheng-7188	280	11	n.	n.	NOUN
fumecheng-7188	280	12	,	,	PUNCT
fumecheng-7188	280	13	tatman	tatman	ADJ
fumecheng-7188	280	14	,	,	PUNCT
fumecheng-7188	280	15	n.	n.	NOUN
fumecheng-7188	280	16	,	,	PUNCT
fumecheng-7188	280	17	maropoulos	maropoulos	PROPN
fumecheng-7188	280	18	,	,	PUNCT
fumecheng-7188	280	19	p.	p.	NOUN
fumecheng-7188	280	20	,	,	PUNCT
fumecheng-7188	280	21	2014	2014	NUM
fumecheng-7188	280	22	,	,	PUNCT
fumecheng-7188	280	23	an	an	DET
fumecheng-7188	280	24	exploration	exploration	NOUN
fumecheng-7188	280	25	into	into	ADP
fumecheng-7188	280	26	measurement	measurement	NOUN
fumecheng-7188	280	27	consistency	consistency	NOUN
fumecheng-7188	280	28	on	on	ADP
fumecheng-7188	280	29	coordinate	coordinate	NOUN
fumecheng-7188	280	30	measuring	measure	VERB
fumecheng-7188	280	31	machines	machine	NOUN
fumecheng-7188	280	32	,	,	PUNCT
fumecheng-7188	280	33	procedia	procedia	NOUN
fumecheng-7188	280	34	cirp	cirp	NOUN
fumecheng-7188	280	35	,	,	PUNCT
fumecheng-7188	280	36	volume	volume	NOUN
fumecheng-7188	280	37	25	25	NUM
fumecheng-7188	280	38	,	,	PUNCT
fumecheng-7188	280	39	pp	pp	ADJ
fumecheng-7188	280	40	.	.	PUNCT
fumecheng-7188	281	1	19	19	NUM
fumecheng-7188	281	2	-	-	SYM
fumecheng-7188	281	3	26	26	NUM
fumecheng-7188	281	4	.	.	PUNCT
fumecheng-7188	282	1	24	24	NUM
fumecheng-7188	282	2	.	.	PUNCT
fumecheng-7188	283	1	en	en	ADP
fumecheng-7188	283	2	iso	iso	NOUN
fumecheng-7188	283	3	1101:2017	1101:2017	NUM
fumecheng-7188	283	4	:	:	PUNCT
fumecheng-7188	283	5	geometrical	geometrical	ADJ
fumecheng-7188	283	6	product	product	NOUN
fumecheng-7188	283	7	specifications	specification	NOUN
fumecheng-7188	283	8	(	(	PUNCT
fumecheng-7188	283	9	gps	gps	PROPN
fumecheng-7188	283	10	)	)	PUNCT
fumecheng-7188	283	11	.	.	PUNCT
fumecheng-7188	284	1	25	25	NUM
fumecheng-7188	284	2	.	.	X
fumecheng-7188	285	1	qiu	qiu	PROPN
fumecheng-7188	285	2	,	,	PUNCT
fumecheng-7188	285	3	h.	h.	PROPN
fumecheng-7188	285	4	,	,	PUNCT
fumecheng-7188	285	5	li	li	PROPN
fumecheng-7188	285	6	,	,	PUNCT
fumecheng-7188	285	7	y.	y.	PROPN
fumecheng-7188	285	8	,	,	PUNCT
fumecheng-7188	285	9	cheng	cheng	PROPN
fumecheng-7188	285	10	,	,	PUNCT
fumecheng-7188	285	11	k.	k.	PROPN
fumecheng-7188	285	12	,	,	PUNCT
fumecheng-7188	285	13	li	li	PROPN
fumecheng-7188	285	14	,	,	PUNCT
fumecheng-7188	285	15	y.	y.	PROPN
fumecheng-7188	285	16	,	,	PUNCT
fumecheng-7188	285	17	2000	2000	NUM
fumecheng-7188	285	18	,	,	PUNCT
fumecheng-7188	285	19	a	a	DET
fumecheng-7188	285	20	practical	practical	ADJ
fumecheng-7188	285	21	evaluation	evaluation	NOUN
fumecheng-7188	285	22	approach	approach	NOUN
fumecheng-7188	285	23	towards	towards	ADP
fumecheng-7188	285	24	form	form	NOUN
fumecheng-7188	285	25	deviation	deviation	NOUN
fumecheng-7188	285	26	for	for	ADP
fumecheng-7188	285	27	two	two	NUM
fumecheng-7188	285	28	-	-	PUNCT
fumecheng-7188	285	29	dimensional	dimensional	ADJ
fumecheng-7188	285	30	contours	contours	NOUN
fumecheng-7188	285	31	based	base	VERB
fumecheng-7188	285	32	on	on	ADP
fumecheng-7188	285	33	coordinate	coordinate	NOUN
fumecheng-7188	285	34	measurement	measurement	NOUN
fumecheng-7188	285	35	data	datum	NOUN
fumecheng-7188	285	36	,	,	PUNCT
fumecheng-7188	285	37	international	international	ADJ
fumecheng-7188	285	38	journal	journal	NOUN
fumecheng-7188	285	39	of	of	ADP
fumecheng-7188	285	40	machine	machine	NOUN
fumecheng-7188	285	41	tools	tool	NOUN
fumecheng-7188	285	42	&	&	CCONJ
fumecheng-7188	285	43	manufacture	manufacture	NOUN
fumecheng-7188	285	44	,	,	PUNCT
fumecheng-7188	285	45	40	40	NUM
fumecheng-7188	285	46	,	,	PUNCT
fumecheng-7188	285	47	pp	pp	ADJ
fumecheng-7188	285	48	.	.	PUNCT
fumecheng-7188	286	1	259–275	259–275	NUM
fumecheng-7188	286	2	.	.	NOUN
fumecheng-7188	286	3	26	26	NUM
fumecheng-7188	286	4	.	.	PUNCT
fumecheng-7188	287	1	fan	fan	PROPN
fumecheng-7188	287	2	,	,	PUNCT
fumecheng-7188	287	3	j.	j.	PROPN
fumecheng-7188	287	4	,	,	PUNCT
fumecheng-7188	287	5	ma	ma	PROPN
fumecheng-7188	287	6	,	,	PUNCT
fumecheng-7188	287	7	l.	l.	PROPN
fumecheng-7188	287	8	,	,	PUNCT
fumecheng-7188	287	9	sun	sun	PROPN
fumecheng-7188	287	10	,	,	PUNCT
fumecheng-7188	287	11	a.	a.	PROPN
fumecheng-7188	287	12	,	,	PUNCT
fumecheng-7188	287	13	zou	zou	PROPN
fumecheng-7188	287	14	,	,	PUNCT
fumecheng-7188	287	15	zh	zh	PROPN
fumecheng-7188	287	16	.	.	PROPN
fumecheng-7188	287	17	,	,	PUNCT
fumecheng-7188	287	18	2020	2020	NUM
fumecheng-7188	287	19	,	,	PUNCT
fumecheng-7188	287	20	an	an	DET
fumecheng-7188	287	21	approach	approach	NOUN
fumecheng-7188	287	22	for	for	ADP
fumecheng-7188	287	23	extracting	extract	VERB
fumecheng-7188	287	24	curve	curve	NOUN
fumecheng-7188	287	25	profiles	profile	NOUN
fumecheng-7188	287	26	based	base	VERB
fumecheng-7188	287	27	on	on	ADP
fumecheng-7188	287	28	scanned	scan	VERB
fumecheng-7188	287	29	point	point	NOUN
fumecheng-7188	287	30	cloud	cloud	NOUN
fumecheng-7188	287	31	,	,	PUNCT
fumecheng-7188	287	32	measurement	measurement	NOUN
fumecheng-7188	287	33	,	,	PUNCT
fumecheng-7188	287	34	149	149	NUM
fumecheng-7188	287	35	,	,	PUNCT
fumecheng-7188	287	36	article	article	NOUN
fumecheng-7188	287	37	107023	107023	NUM
fumecheng-7188	287	38	.	.	PUNCT
fumecheng-7188	288	1	27	27	NUM
fumecheng-7188	288	2	.	.	PUNCT
fumecheng-7188	289	1	crysta	crysta	PROPN
fumecheng-7188	289	2	-	-	PUNCT
fumecheng-7188	289	3	apex	apex	PROPN
fumecheng-7188	289	4	s	s	PROPN
fumecheng-7188	289	5	series	series	NOUN
fumecheng-7188	289	6	,	,	PUNCT
fumecheng-7188	289	7	bulletin	bulletin	NOUN
fumecheng-7188	289	8	no	no	INTJ
fumecheng-7188	289	9	.	.	PUNCT
fumecheng-7188	290	1	2173	2173	NUM
fumecheng-7188	290	2	,	,	PUNCT
fumecheng-7188	290	3	mitutoyo	mitutoyo	PROPN
fumecheng-7188	290	4	,	,	PUNCT
fumecheng-7188	290	5	https://www.mitutoyo.com/wp-content/uploads/	https://www.mitutoyo.com/wp-content/uploads/	PROPN
fumecheng-7188	290	6	2013/01/2097_crysta_apexs.pdf	2013/01/2097_crysta_apexs.pdf	NUM
fumecheng-7188	290	7	(	(	PUNCT
fumecheng-7188	290	8	accessed	access	VERB
fumecheng-7188	290	9	on	on	ADP
fumecheng-7188	290	10	december	december	PROPN
fumecheng-7188	290	11	,	,	PUNCT
fumecheng-7188	290	12	7	7	NUM
fumecheng-7188	290	13	,	,	PUNCT
fumecheng-7188	290	14	2020	2020	NUM
fumecheng-7188	290	15	)	)	PUNCT
fumecheng-7188	290	16	.	.	PUNCT
fumecheng-7188	291	1	28	28	NUM
fumecheng-7188	291	2	.	.	PUNCT
fumecheng-7188	292	1	gapinski	gapinski	PROPN
fumecheng-7188	292	2	,	,	PUNCT
fumecheng-7188	292	3	b.	b.	PROPN
fumecheng-7188	292	4	,	,	PUNCT
fumecheng-7188	292	5	grzelka	grzelka	PROPN
fumecheng-7188	292	6	,	,	PUNCT
fumecheng-7188	292	7	m.	m.	NOUN
fumecheng-7188	292	8	,	,	PUNCT
fumecheng-7188	292	9	rucki	rucki	PROPN
fumecheng-7188	292	10	,	,	PUNCT
fumecheng-7188	292	11	m.	m.	NOUN
fumecheng-7188	292	12	,	,	PUNCT
fumecheng-7188	292	13	2006	2006	NUM
fumecheng-7188	292	14	,	,	PUNCT
fumecheng-7188	292	15	the	the	DET
fumecheng-7188	292	16	roundness	roundness	NOUN
fumecheng-7188	292	17	deviation	deviation	NOUN
fumecheng-7188	292	18	measurement	measurement	NOUN
fumecheng-7188	292	19	with	with	ADP
fumecheng-7188	292	20	coordinate	coordinate	NOUN
fumecheng-7188	292	21	measuring	measure	VERB
fumecheng-7188	292	22	machines	machine	NOUN
fumecheng-7188	292	23	,	,	PUNCT
fumecheng-7188	292	24	engineering	engineering	NOUN
fumecheng-7188	292	25	review	review	NOUN
fumecheng-7188	292	26	,	,	PUNCT
fumecheng-7188	292	27	26(1	26(1	NUM
fumecheng-7188	292	28	-	-	SYM
fumecheng-7188	292	29	2	2	NUM
fumecheng-7188	292	30	)	)	PUNCT
fumecheng-7188	292	31	,	,	PUNCT
fumecheng-7188	292	32	pp	pp	ADJ
fumecheng-7188	292	33	.	.	PUNCT
fumecheng-7188	293	1	1	1	NUM
fumecheng-7188	293	2	-	-	SYM
fumecheng-7188	293	3	6	6	NUM
fumecheng-7188	293	4	.	.	NOUN
fumecheng-7188	293	5	29	29	NUM
fumecheng-7188	293	6	.	.	PUNCT
fumecheng-7188	294	1	gapinski	gapinski	PROPN
fumecheng-7188	294	2	,	,	PUNCT
fumecheng-7188	294	3	b.	b.	PROPN
fumecheng-7188	294	4	,	,	PUNCT
fumecheng-7188	294	5	rucki	rucki	PROPN
fumecheng-7188	294	6	,	,	PUNCT
fumecheng-7188	294	7	m.	m.	NOUN
fumecheng-7188	294	8	,	,	PUNCT
fumecheng-7188	294	9	2008	2008	NUM
fumecheng-7188	294	10	,	,	PUNCT
fumecheng-7188	294	11	the	the	DET
fumecheng-7188	294	12	roundness	roundness	NOUN
fumecheng-7188	294	13	deviation	deviation	NOUN
fumecheng-7188	294	14	measurement	measurement	NOUN
fumecheng-7188	294	15	with	with	ADP
fumecheng-7188	294	16	cmm	cmm	PROPN
fumecheng-7188	294	17	,	,	PUNCT
fumecheng-7188	294	18	2008	2008	NUM
fumecheng-7188	294	19	ieee	ieee	NOUN
fumecheng-7188	294	20	international	international	ADJ
fumecheng-7188	294	21	workshop	workshop	NOUN
fumecheng-7188	294	22	on	on	ADP
fumecheng-7188	294	23	advanced	advanced	ADJ
fumecheng-7188	294	24	methods	method	NOUN
fumecheng-7188	294	25	for	for	ADP
fumecheng-7188	294	26	uncertainty	uncertainty	NOUN
fumecheng-7188	294	27	estimation	estimation	NOUN
fumecheng-7188	294	28	in	in	ADP
fumecheng-7188	294	29	measurement	measurement	NOUN
fumecheng-7188	294	30	,	,	PUNCT
fumecheng-7188	294	31	pp	pp	PROPN
fumecheng-7188	294	32	.	.	PUNCT
fumecheng-7188	295	1	108	108	NUM
fumecheng-7188	295	2	-	-	SYM
fumecheng-7188	295	3	111	111	NUM
fumecheng-7188	295	4	,	,	PUNCT
fumecheng-7188	295	5	doi	doi	NOUN
fumecheng-7188	295	6	:	:	PUNCT
fumecheng-7188	295	7	10.1109	10.1109	NUM
fumecheng-7188	295	8	/	/	SYM
fumecheng-7188	295	9	amuem.2008.4589944	amuem.2008.4589944	NUM
fumecheng-7188	295	10	30	30	NUM
fumecheng-7188	295	11	.	.	PUNCT
fumecheng-7188	296	1	jcgm	jcgm	PROPN
fumecheng-7188	296	2	100:2008	100:2008	PROPN
fumecheng-7188	296	3	.	.	PUNCT
fumecheng-7188	297	1	evaluation	evaluation	NOUN
fumecheng-7188	297	2	of	of	ADP
fumecheng-7188	297	3	measurement	measurement	NOUN
fumecheng-7188	297	4	data	datum	NOUN
fumecheng-7188	297	5	—	—	PUNCT
fumecheng-7188	297	6	guide	guide	VERB
fumecheng-7188	297	7	to	to	ADP
fumecheng-7188	297	8	the	the	DET
fumecheng-7188	297	9	expression	expression	NOUN
fumecheng-7188	297	10	of	of	ADP
fumecheng-7188	297	11	uncertainty	uncertainty	NOUN
fumecheng-7188	297	12	in	in	ADP
fumecheng-7188	297	13	measurement	measurement	NOUN
fumecheng-7188	297	14	.	.	PUNCT
fumecheng-7188	298	1	31	31	NUM
fumecheng-7188	298	2	.	.	PUNCT
fumecheng-7188	299	1	jezierski	jezierski	PROPN
fumecheng-7188	299	2	,	,	PUNCT
fumecheng-7188	299	3	j.	j.	PROPN
fumecheng-7188	299	4	,	,	PUNCT
fumecheng-7188	299	5	kowalik	kowalik	PROPN
fumecheng-7188	299	6	,	,	PUNCT
fumecheng-7188	299	7	m.	m.	NOUN
fumecheng-7188	299	8	,	,	PUNCT
fumecheng-7188	299	9	siemiatkowski	siemiatkowski	PROPN
fumecheng-7188	299	10	,	,	PUNCT
fumecheng-7188	299	11	z.	z.	PROPN
fumecheng-7188	299	12	,	,	PUNCT
fumecheng-7188	299	13	warowny	warowny	PROPN
fumecheng-7188	299	14	,	,	PUNCT
fumecheng-7188	299	15	r.	r.	PROPN
fumecheng-7188	299	16	,	,	PUNCT
fumecheng-7188	299	17	2010	2010	NUM
fumecheng-7188	299	18	,	,	PUNCT
fumecheng-7188	299	19	tolerance	tolerance	NOUN
fumecheng-7188	299	20	analysis	analysis	NOUN
fumecheng-7188	299	21	in	in	ADP
fumecheng-7188	299	22	the	the	DET
fumecheng-7188	299	23	mechanical	mechanical	ADJ
fumecheng-7188	299	24	engineering	engineering	NOUN
fumecheng-7188	299	25	,	,	PUNCT
fumecheng-7188	299	26	wnt	wnt	PROPN
fumecheng-7188	299	27	,	,	PUNCT
fumecheng-7188	299	28	warszawa	warszawa	PROPN
fumecheng-7188	299	29	(	(	PUNCT
fumecheng-7188	299	30	in	in	ADP
fumecheng-7188	299	31	polish	polish	NOUN
fumecheng-7188	299	32	)	)	PUNCT
fumecheng-7188	299	33	.	.	PUNCT
fumecheng-7188	300	1	32	32	NUM
fumecheng-7188	300	2	.	.	PUNCT
fumecheng-7188	301	1	messinis	messinis	PROPN
fumecheng-7188	301	2	,	,	PUNCT
fumecheng-7188	301	3	s.	s.	PROPN
fumecheng-7188	301	4	,	,	PUNCT
fumecheng-7188	301	5	vosniakos	vosniakos	INTJ
fumecheng-7188	301	6	,	,	PUNCT
fumecheng-7188	301	7	g.c	g.c	PROPN
fumecheng-7188	301	8	.	.	PROPN
fumecheng-7188	301	9	,	,	PUNCT
fumecheng-7188	301	10	2020	2020	NUM
fumecheng-7188	301	11	,	,	PUNCT
fumecheng-7188	301	12	an	an	DET
fumecheng-7188	301	13	agent	agent	NOUN
fumecheng-7188	301	14	-	-	PUNCT
fumecheng-7188	301	15	based	base	VERB
fumecheng-7188	301	16	flexible	flexible	ADJ
fumecheng-7188	301	17	manufacturing	manufacturing	NOUN
fumecheng-7188	301	18	system	system	NOUN
fumecheng-7188	301	19	controller	controller	NOUN
fumecheng-7188	301	20	with	with	ADP
fumecheng-7188	301	21	petri	petri	ADJ
fumecheng-7188	301	22	-	-	ADJ
fumecheng-7188	301	23	net	net	NOUN
fumecheng-7188	301	24	enabled	enable	VERB
fumecheng-7188	301	25	algebraic	algebraic	ADJ
fumecheng-7188	301	26	deadlock	deadlock	NOUN
fumecheng-7188	301	27	avoidance	avoidance	NOUN
fumecheng-7188	301	28	,	,	PUNCT
fumecheng-7188	301	29	reports	report	NOUN
fumecheng-7188	301	30	in	in	ADP
fumecheng-7188	301	31	mechanical	mechanical	ADJ
fumecheng-7188	301	32	engineering	engineering	NOUN
fumecheng-7188	301	33	,	,	PUNCT
fumecheng-7188	301	34	1(1	1(1	NUM
fumecheng-7188	301	35	)	)	PUNCT
fumecheng-7188	301	36	,	,	PUNCT
fumecheng-7188	301	37	pp	pp	ADP
fumecheng-7188	301	38	.	.	PUNCT
fumecheng-7188	302	1	77	77	NUM
fumecheng-7188	302	2	-	-	SYM
fumecheng-7188	302	3	92	92	NUM
fumecheng-7188	302	4	.	.	PUNCT