id	sid	tid	token	lemma	pos
fumecheng-7594	1	1	7594	7594	NUM
fumecheng-7594	1	2	facta	facta	PROPN
fumecheng-7594	1	3	universitatis	universitatis	PROPN
fumecheng-7594	1	4	series	series	NOUN
fumecheng-7594	1	5	:	:	PUNCT
fumecheng-7594	1	6	mechanical	mechanical	ADJ
fumecheng-7594	1	7	engineering	engineering	NOUN
fumecheng-7594	1	8	vol	vol	NOUN
fumecheng-7594	1	9	.	.	PROPN
fumecheng-7594	1	10	20	20	NUM
fumecheng-7594	1	11	,	,	PUNCT
fumecheng-7594	1	12	no	no	DET
fumecheng-7594	1	13	1	1	NUM
fumecheng-7594	1	14	,	,	PUNCT
fumecheng-7594	1	15	2022	2022	NUM
fumecheng-7594	1	16	,	,	PUNCT
fumecheng-7594	1	17	pp	pp	ADJ
fumecheng-7594	1	18	.	.	PUNCT
fumecheng-7594	2	1	109	109	NUM
fumecheng-7594	2	2	126	126	NUM
fumecheng-7594	2	3	https://doi.org/10.22190/fume210311036n	https://doi.org/10.22190/fume210311036n	NUM
fumecheng-7594	2	4	©	©	PROPN
fumecheng-7594	2	5	2022	2022	NUM
fumecheng-7594	2	6	by	by	ADP
fumecheng-7594	2	7	university	university	PROPN
fumecheng-7594	2	8	of	of	ADP
fumecheng-7594	2	9	niš	niš	PROPN
fumecheng-7594	2	10	,	,	PUNCT
fumecheng-7594	2	11	serbia	serbia	PROPN
fumecheng-7594	2	12	|	|	ADV
fumecheng-7594	2	13	creative	creative	ADJ
fumecheng-7594	2	14	commons	common	NOUN
fumecheng-7594	2	15	license	license	NOUN
fumecheng-7594	2	16	:	:	PUNCT
fumecheng-7594	2	17	cc	cc	VERB
fumecheng-7594	2	18	by	by	ADP
fumecheng-7594	2	19	-	-	PUNCT
fumecheng-7594	2	20	nc	nc	VERB
fumecheng-7594	2	21	-	-	PUNCT
fumecheng-7594	2	22	nd	nd	ADV
fumecheng-7594	2	23	original	original	ADJ
fumecheng-7594	2	24	scientific	scientific	ADJ
fumecheng-7594	2	25	paper	paper	NUM
fumecheng-7594	2	26	investigation	investigation	NOUN
fumecheng-7594	2	27	of	of	ADP
fumecheng-7594	2	28	influences	influence	NOUN
fumecheng-7594	2	29	of	of	ADP
fumecheng-7594	2	30	fabrication	fabrication	NOUN
fumecheng-7594	2	31	tolerances	tolerance	NOUN
fumecheng-7594	2	32	on	on	ADP
fumecheng-7594	2	33	operational	operational	ADJ
fumecheng-7594	2	34	characteristics	characteristic	NOUN
fumecheng-7594	2	35	of	of	ADP
fumecheng-7594	2	36	piezo	piezo	ADJ
fumecheng-7594	2	37	-	-	ADJ
fumecheng-7594	2	38	actuated	actuate	VERB
fumecheng-7594	2	39	stick	stick	NOUN
fumecheng-7594	2	40	-	-	PUNCT
fumecheng-7594	2	41	slip	slip	NOUN
fumecheng-7594	2	42	micro	micro	NOUN
fumecheng-7594	2	43	-	-	NOUN
fumecheng-7594	2	44	drives	drive	NOUN
fumecheng-7594	2	45	xuan	xuan	PROPN
fumecheng-7594	2	46	-	-	PUNCT
fumecheng-7594	2	47	ha	ha	INTJ
fumecheng-7594	2	48	nguyen	nguyen	PROPN
fumecheng-7594	2	49	,	,	PUNCT
fumecheng-7594	2	50	hung	hung	NOUN
fumecheng-7594	2	51	-	-	PUNCT
fumecheng-7594	2	52	anh	anh	NOUN
fumecheng-7594	2	53	nguyen	nguyen	PROPN
fumecheng-7594	2	54	department	department	PROPN
fumecheng-7594	2	55	of	of	ADP
fumecheng-7594	2	56	machine	machine	NOUN
fumecheng-7594	2	57	design	design	NOUN
fumecheng-7594	2	58	and	and	CCONJ
fumecheng-7594	2	59	robotics	robotic	NOUN
fumecheng-7594	2	60	,	,	PUNCT
fumecheng-7594	2	61	school	school	NOUN
fumecheng-7594	2	62	of	of	ADP
fumecheng-7594	2	63	mechanical	mechanical	ADJ
fumecheng-7594	2	64	engineering	engineering	NOUN
fumecheng-7594	2	65	,	,	PUNCT
fumecheng-7594	2	66	hanoi	hanoi	PROPN
fumecheng-7594	2	67	university	university	PROPN
fumecheng-7594	2	68	of	of	ADP
fumecheng-7594	2	69	science	science	NOUN
fumecheng-7594	2	70	and	and	CCONJ
fumecheng-7594	2	71	technology	technology	NOUN
fumecheng-7594	2	72	,	,	PUNCT
fumecheng-7594	2	73	hanoi	hanoi	PROPN
fumecheng-7594	2	74	,	,	PUNCT
fumecheng-7594	2	75	vietnam	vietnam	PROPN
fumecheng-7594	2	76	abstract	abstract	NOUN
fumecheng-7594	2	77	.	.	PUNCT
fumecheng-7594	3	1	piezo	piezo	ADJ
fumecheng-7594	3	2	-	-	ADJ
fumecheng-7594	3	3	actuated	actuate	VERB
fumecheng-7594	3	4	stick	stick	NOUN
fumecheng-7594	3	5	-	-	PUNCT
fumecheng-7594	3	6	slip	slip	NOUN
fumecheng-7594	3	7	micro	micro	NOUN
fumecheng-7594	3	8	-	-	NOUN
fumecheng-7594	3	9	drives	drive	NOUN
fumecheng-7594	3	10	(	(	PUNCT
fumecheng-7594	3	11	passmds	passmds	NOUN
fumecheng-7594	3	12	)	)	PUNCT
fumecheng-7594	3	13	are	be	AUX
fumecheng-7594	3	14	often	often	ADV
fumecheng-7594	3	15	used	use	VERB
fumecheng-7594	3	16	in	in	ADP
fumecheng-7594	3	17	microrobotic	microrobotic	ADJ
fumecheng-7594	3	18	applications	application	NOUN
fumecheng-7594	3	19	due	due	ADP
fumecheng-7594	3	20	to	to	ADP
fumecheng-7594	3	21	their	their	PRON
fumecheng-7594	3	22	advantages	advantage	NOUN
fumecheng-7594	3	23	of	of	ADP
fumecheng-7594	3	24	a	a	DET
fumecheng-7594	3	25	straightforward	straightforward	ADJ
fumecheng-7594	3	26	design	design	NOUN
fumecheng-7594	3	27	and	and	CCONJ
fumecheng-7594	3	28	good	good	ADJ
fumecheng-7594	3	29	operational	operational	ADJ
fumecheng-7594	3	30	characteristics	characteristic	NOUN
fumecheng-7594	3	31	.	.	PUNCT
fumecheng-7594	4	1	in	in	ADP
fumecheng-7594	4	2	this	this	DET
fumecheng-7594	4	3	work	work	NOUN
fumecheng-7594	4	4	,	,	PUNCT
fumecheng-7594	4	5	influences	influence	NOUN
fumecheng-7594	4	6	of	of	ADP
fumecheng-7594	4	7	fabrication	fabrication	NOUN
fumecheng-7594	4	8	tolerances	tolerance	NOUN
fumecheng-7594	4	9	on	on	ADP
fumecheng-7594	4	10	operational	operational	ADJ
fumecheng-7594	4	11	characteristics	characteristic	NOUN
fumecheng-7594	4	12	of	of	ADP
fumecheng-7594	4	13	passmds	passmds	NOUN
fumecheng-7594	4	14	are	be	AUX
fumecheng-7594	4	15	theoretically	theoretically	ADV
fumecheng-7594	4	16	investigated	investigate	VERB
fumecheng-7594	4	17	.	.	PUNCT
fumecheng-7594	5	1	a	a	DET
fumecheng-7594	5	2	dynamic	dynamic	ADJ
fumecheng-7594	5	3	model	model	NOUN
fumecheng-7594	5	4	describing	describe	VERB
fumecheng-7594	5	5	the	the	DET
fumecheng-7594	5	6	whole	whole	ADJ
fumecheng-7594	5	7	macroscopic	macroscopic	ADJ
fumecheng-7594	5	8	movement	movement	NOUN
fumecheng-7594	5	9	of	of	ADP
fumecheng-7594	5	10	the	the	DET
fumecheng-7594	5	11	driver	driver	NOUN
fumecheng-7594	5	12	’s	’s	PART
fumecheng-7594	5	13	runner	runner	NOUN
fumecheng-7594	5	14	and	and	CCONJ
fumecheng-7594	5	15	the	the	DET
fumecheng-7594	5	16	actuators	actuator	NOUN
fumecheng-7594	5	17	,	,	PUNCT
fumecheng-7594	5	18	and	and	CCONJ
fumecheng-7594	5	19	the	the	DET
fumecheng-7594	5	20	microscopic	microscopic	ADJ
fumecheng-7594	5	21	behavior	behavior	NOUN
fumecheng-7594	5	22	of	of	ADP
fumecheng-7594	5	23	the	the	DET
fumecheng-7594	5	24	frictional	frictional	ADJ
fumecheng-7594	5	25	contacts	contact	NOUN
fumecheng-7594	5	26	using	use	VERB
fumecheng-7594	5	27	the	the	DET
fumecheng-7594	5	28	method	method	NOUN
fumecheng-7594	5	29	of	of	ADP
fumecheng-7594	5	30	dimensionality	dimensionality	NOUN
fumecheng-7594	5	31	reduction	reduction	NOUN
fumecheng-7594	5	32	,	,	PUNCT
fumecheng-7594	5	33	was	be	AUX
fumecheng-7594	5	34	used	use	VERB
fumecheng-7594	5	35	.	.	PUNCT
fumecheng-7594	6	1	three	three	NUM
fumecheng-7594	6	2	essential	essential	ADJ
fumecheng-7594	6	3	parameters	parameter	NOUN
fumecheng-7594	6	4	of	of	ADP
fumecheng-7594	6	5	the	the	DET
fumecheng-7594	6	6	drives	drive	NOUN
fumecheng-7594	6	7	including	include	VERB
fumecheng-7594	6	8	the	the	DET
fumecheng-7594	6	9	angle	angle	NOUN
fumecheng-7594	6	10	between	between	ADP
fumecheng-7594	6	11	working	working	NOUN
fumecheng-7594	6	12	surfaces	surface	NOUN
fumecheng-7594	6	13	of	of	ADP
fumecheng-7594	6	14	the	the	DET
fumecheng-7594	6	15	runner	runner	NOUN
fumecheng-7594	6	16	,	,	PUNCT
fumecheng-7594	6	17	the	the	DET
fumecheng-7594	6	18	alignment	alignment	NOUN
fumecheng-7594	6	19	angle	angle	NOUN
fumecheng-7594	6	20	between	between	ADP
fumecheng-7594	6	21	two	two	NUM
fumecheng-7594	6	22	actuator	actuator	NOUN
fumecheng-7594	6	23	blocks	block	NOUN
fumecheng-7594	6	24	on	on	ADP
fumecheng-7594	6	25	each	each	DET
fumecheng-7594	6	26	side	side	NOUN
fumecheng-7594	6	27	of	of	ADP
fumecheng-7594	6	28	the	the	DET
fumecheng-7594	6	29	runner	runner	NOUN
fumecheng-7594	6	30	,	,	PUNCT
fumecheng-7594	6	31	and	and	CCONJ
fumecheng-7594	6	32	the	the	DET
fumecheng-7594	6	33	stiffness	stiffness	NOUN
fumecheng-7594	6	34	of	of	ADP
fumecheng-7594	6	35	an	an	DET
fumecheng-7594	6	36	individual	individual	ADJ
fumecheng-7594	6	37	actuator	actuator	NOUN
fumecheng-7594	6	38	,	,	PUNCT
fumecheng-7594	6	39	whose	whose	DET
fumecheng-7594	6	40	values	value	NOUN
fumecheng-7594	6	41	are	be	AUX
fumecheng-7594	6	42	impacted	impact	VERB
fumecheng-7594	6	43	by	by	ADP
fumecheng-7594	6	44	the	the	DET
fumecheng-7594	6	45	tolerance	tolerance	NOUN
fumecheng-7594	6	46	of	of	ADP
fumecheng-7594	6	47	the	the	DET
fumecheng-7594	6	48	fabrication	fabrication	NOUN
fumecheng-7594	6	49	and	and	CCONJ
fumecheng-7594	6	50	assembly	assembly	NOUN
fumecheng-7594	6	51	process	process	NOUN
fumecheng-7594	6	52	,	,	PUNCT
fumecheng-7594	6	53	were	be	AUX
fumecheng-7594	6	54	considered	consider	VERB
fumecheng-7594	6	55	as	as	ADP
fumecheng-7594	6	56	the	the	DET
fumecheng-7594	6	57	input	input	NOUN
fumecheng-7594	6	58	of	of	ADP
fumecheng-7594	6	59	the	the	DET
fumecheng-7594	6	60	investigation	investigation	NOUN
fumecheng-7594	6	61	.	.	PUNCT
fumecheng-7594	7	1	by	by	ADP
fumecheng-7594	7	2	performing	perform	VERB
fumecheng-7594	7	3	hybrid	hybrid	ADJ
fumecheng-7594	7	4	-	-	PUNCT
fumecheng-7594	7	5	dynamic	dynamic	ADJ
fumecheng-7594	7	6	simulations	simulation	NOUN
fumecheng-7594	7	7	,	,	PUNCT
fumecheng-7594	7	8	influences	influence	NOUN
fumecheng-7594	7	9	of	of	ADP
fumecheng-7594	7	10	these	these	DET
fumecheng-7594	7	11	parameters	parameter	NOUN
fumecheng-7594	7	12	on	on	ADP
fumecheng-7594	7	13	the	the	DET
fumecheng-7594	7	14	drives	drive	NOUN
fumecheng-7594	7	15	'	'	PART
fumecheng-7594	7	16	operational	operational	ADJ
fumecheng-7594	7	17	characteristics	characteristic	NOUN
fumecheng-7594	7	18	,	,	PUNCT
fumecheng-7594	7	19	including	include	VERB
fumecheng-7594	7	20	the	the	DET
fumecheng-7594	7	21	repeatability	repeatability	NOUN
fumecheng-7594	7	22	of	of	ADP
fumecheng-7594	7	23	the	the	DET
fumecheng-7594	7	24	step	step	NOUN
fumecheng-7594	7	25	length	length	NOUN
fumecheng-7594	7	26	,	,	PUNCT
fumecheng-7594	7	27	the	the	DET
fumecheng-7594	7	28	critical	critical	ADJ
fumecheng-7594	7	29	amplitude	amplitude	NOUN
fumecheng-7594	7	30	phenomenon	phenomenon	NOUN
fumecheng-7594	7	31	,	,	PUNCT
fumecheng-7594	7	32	and	and	CCONJ
fumecheng-7594	7	33	the	the	DET
fumecheng-7594	7	34	maximal	maximal	ADJ
fumecheng-7594	7	35	-	-	PUNCT
fumecheng-7594	7	36	achievable	achievable	ADJ
fumecheng-7594	7	37	driving	driving	NOUN
fumecheng-7594	7	38	frequency	frequency	NOUN
fumecheng-7594	7	39	/	/	SYM
fumecheng-7594	7	40	velocity	velocity	NOUN
fumecheng-7594	7	41	,	,	PUNCT
fumecheng-7594	7	42	were	be	AUX
fumecheng-7594	7	43	evaluated	evaluate	VERB
fumecheng-7594	7	44	.	.	PUNCT
fumecheng-7594	8	1	simulation	simulation	NOUN
fumecheng-7594	8	2	results	result	NOUN
fumecheng-7594	8	3	show	show	VERB
fumecheng-7594	8	4	that	that	SCONJ
fumecheng-7594	8	5	these	these	DET
fumecheng-7594	8	6	parameters	parameter	NOUN
fumecheng-7594	8	7	significantly	significantly	ADV
fumecheng-7594	8	8	influence	influence	VERB
fumecheng-7594	8	9	on	on	ADP
fumecheng-7594	8	10	the	the	DET
fumecheng-7594	8	11	characteristics	characteristic	NOUN
fumecheng-7594	8	12	of	of	ADP
fumecheng-7594	8	13	the	the	DET
fumecheng-7594	8	14	drives	drive	NOUN
fumecheng-7594	8	15	.	.	PUNCT
fumecheng-7594	9	1	the	the	DET
fumecheng-7594	9	2	contribution	contribution	NOUN
fumecheng-7594	9	3	of	of	ADP
fumecheng-7594	9	4	this	this	DET
fumecheng-7594	9	5	work	work	NOUN
fumecheng-7594	9	6	is	be	AUX
fumecheng-7594	9	7	so	so	ADV
fumecheng-7594	9	8	important	important	ADJ
fumecheng-7594	9	9	that	that	SCONJ
fumecheng-7594	9	10	several	several	ADJ
fumecheng-7594	9	11	important	important	ADJ
fumecheng-7594	9	12	phenomena	phenomenon	NOUN
fumecheng-7594	9	13	of	of	ADP
fumecheng-7594	9	14	passmds	passmds	NOUN
fumecheng-7594	9	15	,	,	PUNCT
fumecheng-7594	9	16	which	which	PRON
fumecheng-7594	9	17	are	be	AUX
fumecheng-7594	9	18	experimentally	experimentally	ADV
fumecheng-7594	9	19	detected	detect	VERB
fumecheng-7594	9	20	,	,	PUNCT
fumecheng-7594	9	21	are	be	AUX
fumecheng-7594	9	22	physically	physically	ADV
fumecheng-7594	9	23	explained	explain	VERB
fumecheng-7594	9	24	for	for	ADP
fumecheng-7594	9	25	the	the	DET
fumecheng-7594	9	26	first	first	ADJ
fumecheng-7594	9	27	time	time	NOUN
fumecheng-7594	9	28	.	.	PUNCT
fumecheng-7594	10	1	the	the	DET
fumecheng-7594	10	2	results	result	NOUN
fumecheng-7594	10	3	of	of	ADP
fumecheng-7594	10	4	this	this	DET
fumecheng-7594	10	5	work	work	NOUN
fumecheng-7594	10	6	could	could	AUX
fumecheng-7594	10	7	help	help	VERB
fumecheng-7594	10	8	designers	designer	NOUN
fumecheng-7594	10	9	to	to	PART
fumecheng-7594	10	10	optimize	optimize	VERB
fumecheng-7594	10	11	for	for	ADP
fumecheng-7594	10	12	better	well	ADJ
fumecheng-7594	10	13	generations	generation	NOUN
fumecheng-7594	10	14	of	of	ADP
fumecheng-7594	10	15	passmds	passmds	NOUN
fumecheng-7594	10	16	.	.	PUNCT
fumecheng-7594	11	1	key	key	ADJ
fumecheng-7594	11	2	words	word	NOUN
fumecheng-7594	11	3	:	:	PUNCT
fumecheng-7594	11	4	microrobotics	microrobotic	NOUN
fumecheng-7594	11	5	,	,	PUNCT
fumecheng-7594	11	6	stick	stick	NOUN
fumecheng-7594	11	7	-	-	PUNCT
fumecheng-7594	11	8	slip	slip	NOUN
fumecheng-7594	11	9	micro	micro	NOUN
fumecheng-7594	11	10	-	-	NOUN
fumecheng-7594	11	11	drivers	driver	NOUN
fumecheng-7594	11	12	,	,	PUNCT
fumecheng-7594	11	13	piezo	piezo	X
fumecheng-7594	11	14	actuators	actuator	NOUN
fumecheng-7594	11	15	,	,	PUNCT
fumecheng-7594	11	16	contact	contact	NOUN
fumecheng-7594	11	17	mechanics	mechanic	NOUN
fumecheng-7594	11	18	,	,	PUNCT
fumecheng-7594	11	19	dynamic	dynamic	ADJ
fumecheng-7594	11	20	simulation	simulation	NOUN
fumecheng-7594	11	21	,	,	PUNCT
fumecheng-7594	11	22	friction	friction	NOUN
fumecheng-7594	11	23	received	receive	VERB
fumecheng-7594	11	24	march	march	PROPN
fumecheng-7594	11	25	11	11	NUM
fumecheng-7594	11	26	,	,	PUNCT
fumecheng-7594	11	27	2021	2021	NUM
fumecheng-7594	11	28	/	/	SYM
fumecheng-7594	11	29	accepted	accept	VERB
fumecheng-7594	11	30	april	april	PROPN
fumecheng-7594	11	31	12	12	NUM
fumecheng-7594	11	32	,	,	PUNCT
fumecheng-7594	11	33	2021	2021	NUM
fumecheng-7594	11	34	corresponding	correspond	VERB
fumecheng-7594	11	35	author	author	NOUN
fumecheng-7594	11	36	:	:	PUNCT
fumecheng-7594	11	37	xuan	xuan	PROPN
fumecheng-7594	11	38	-	-	PUNCT
fumecheng-7594	11	39	ha	ha	PROPN
fumecheng-7594	11	40	nguyen	nguyen	PROPN
fumecheng-7594	11	41	department	department	PROPN
fumecheng-7594	11	42	of	of	ADP
fumecheng-7594	11	43	machine	machine	NOUN
fumecheng-7594	11	44	design	design	NOUN
fumecheng-7594	11	45	and	and	CCONJ
fumecheng-7594	11	46	robotics	robotic	NOUN
fumecheng-7594	11	47	,	,	PUNCT
fumecheng-7594	11	48	school	school	NOUN
fumecheng-7594	11	49	of	of	ADP
fumecheng-7594	11	50	mechanical	mechanical	ADJ
fumecheng-7594	11	51	engineering	engineering	NOUN
fumecheng-7594	11	52	,	,	PUNCT
fumecheng-7594	11	53	hanoi	hanoi	PROPN
fumecheng-7594	11	54	university	university	PROPN
fumecheng-7594	11	55	of	of	ADP
fumecheng-7594	11	56	science	science	NOUN
fumecheng-7594	11	57	and	and	CCONJ
fumecheng-7594	11	58	technology	technology	NOUN
fumecheng-7594	11	59	,	,	PUNCT
fumecheng-7594	11	60	hanoi	hanoi	PROPN
fumecheng-7594	11	61	112452	112452	NUM
fumecheng-7594	11	62	,	,	PUNCT
fumecheng-7594	11	63	vietnam	vietnam	PROPN
fumecheng-7594	11	64	e	e	NOUN
fumecheng-7594	11	65	-	-	NOUN
fumecheng-7594	11	66	mail	mail	NOUN
fumecheng-7594	11	67	:	:	PUNCT
fumecheng-7594	11	68	ha.nguyenxuan@hust.edu.vn	ha.nguyenxuan@hust.edu.vn	PROPN
fumecheng-7594	11	69	mailto:ha.nguyenxuan@hust.edu.vn	mailto:ha.nguyenxuan@hust.edu.vn	PROPN
fumecheng-7594	11	70	110	110	NUM
fumecheng-7594	11	71	h.	h.	NOUN
fumecheng-7594	11	72	x.	x.	PROPN
fumecheng-7594	11	73	nguyen	nguyen	PROPN
fumecheng-7594	11	74	,	,	PUNCT
fumecheng-7594	11	75	a.	a.	PROPN
fumecheng-7594	11	76	h.	h.	PROPN
fumecheng-7594	11	77	nguyen	nguyen	PROPN
fumecheng-7594	12	1	1	1	X
fumecheng-7594	12	2	.	.	PUNCT
fumecheng-7594	13	1	introduction	introduction	NOUN
fumecheng-7594	13	2	for	for	ADP
fumecheng-7594	13	3	many	many	ADJ
fumecheng-7594	13	4	techniques	technique	NOUN
fumecheng-7594	13	5	of	of	ADP
fumecheng-7594	13	6	the	the	DET
fumecheng-7594	13	7	micro	micro	NOUN
fumecheng-7594	13	8	-	-	NOUN
fumecheng-7594	13	9	system	system	NOUN
fumecheng-7594	13	10	technology	technology	NOUN
fumecheng-7594	13	11	and	and	CCONJ
fumecheng-7594	13	12	the	the	DET
fumecheng-7594	13	13	microrobotics	microrobotic	NOUN
fumecheng-7594	13	14	,	,	PUNCT
fumecheng-7594	13	15	a	a	DET
fumecheng-7594	13	16	need	need	NOUN
fumecheng-7594	13	17	for	for	ADP
fumecheng-7594	13	18	small	small	ADJ
fumecheng-7594	13	19	-	-	PUNCT
fumecheng-7594	13	20	scale	scale	NOUN
fumecheng-7594	13	21	ultra	ultra	ADJ
fumecheng-7594	13	22	-	-	ADJ
fumecheng-7594	13	23	high	high	ADJ
fumecheng-7594	13	24	-	-	PUNCT
fumecheng-7594	13	25	precision	precision	NOUN
fumecheng-7594	13	26	positioning	positioning	NOUN
fumecheng-7594	13	27	and	and	CCONJ
fumecheng-7594	13	28	manipulation	manipulation	NOUN
fumecheng-7594	13	29	devices	device	NOUN
fumecheng-7594	13	30	is	be	AUX
fumecheng-7594	13	31	extremely	extremely	ADV
fumecheng-7594	13	32	necessary	necessary	ADJ
fumecheng-7594	13	33	[	[	X
fumecheng-7594	13	34	1	1	NUM
fumecheng-7594	13	35	]	]	PUNCT
fumecheng-7594	13	36	.	.	PUNCT
fumecheng-7594	14	1	these	these	DET
fumecheng-7594	14	2	devices	device	NOUN
fumecheng-7594	14	3	are	be	AUX
fumecheng-7594	14	4	required	require	VERB
fumecheng-7594	14	5	to	to	PART
fumecheng-7594	14	6	generate	generate	VERB
fumecheng-7594	14	7	motions	motion	NOUN
fumecheng-7594	14	8	with	with	ADP
fumecheng-7594	14	9	a	a	DET
fumecheng-7594	14	10	traveling	travel	VERB
fumecheng-7594	14	11	range	range	NOUN
fumecheng-7594	14	12	of	of	ADP
fumecheng-7594	14	13	several	several	ADJ
fumecheng-7594	14	14	centimeters	centimeter	NOUN
fumecheng-7594	14	15	and	and	CCONJ
fumecheng-7594	14	16	a	a	DET
fumecheng-7594	14	17	very	very	ADV
fumecheng-7594	14	18	high	high	ADJ
fumecheng-7594	14	19	resolution	resolution	NOUN
fumecheng-7594	14	20	of	of	ADP
fumecheng-7594	14	21	sub	sub	NOUN
fumecheng-7594	14	22	micrometer	micrometer	NOUN
fumecheng-7594	14	23	or	or	CCONJ
fumecheng-7594	14	24	several	several	ADJ
fumecheng-7594	14	25	ten	ten	NUM
fumecheng-7594	14	26	nanometers	nanometer	NOUN
fumecheng-7594	14	27	.	.	PUNCT
fumecheng-7594	15	1	additionally	additionally	ADV
fumecheng-7594	15	2	,	,	PUNCT
fumecheng-7594	15	3	the	the	DET
fumecheng-7594	15	4	devices	device	NOUN
fumecheng-7594	15	5	must	must	AUX
fumecheng-7594	15	6	operate	operate	VERB
fumecheng-7594	15	7	in	in	ADP
fumecheng-7594	15	8	special	special	ADJ
fumecheng-7594	15	9	working	work	VERB
fumecheng-7594	15	10	environments	environment	NOUN
fumecheng-7594	15	11	,	,	PUNCT
fumecheng-7594	15	12	which	which	PRON
fumecheng-7594	15	13	are	be	AUX
fumecheng-7594	15	14	usually	usually	ADV
fumecheng-7594	15	15	small	small	ADJ
fumecheng-7594	15	16	-	-	PUNCT
fumecheng-7594	15	17	space	space	NOUN
fumecheng-7594	15	18	,	,	PUNCT
fumecheng-7594	15	19	clean	clean	ADJ
fumecheng-7594	15	20	and	and	CCONJ
fumecheng-7594	15	21	high	high	ADJ
fumecheng-7594	15	22	-	-	PUNCT
fumecheng-7594	15	23	rate	rate	NOUN
fumecheng-7594	15	24	of	of	ADP
fumecheng-7594	15	25	vacuum	vacuum	NOUN
fumecheng-7594	15	26	.	.	PUNCT
fumecheng-7594	16	1	therefore	therefore	ADV
fumecheng-7594	16	2	,	,	PUNCT
fumecheng-7594	16	3	the	the	DET
fumecheng-7594	16	4	miniaturization	miniaturization	NOUN
fumecheng-7594	16	5	and	and	CCONJ
fumecheng-7594	16	6	the	the	DET
fumecheng-7594	16	7	dustfree	dustfree	NOUN
fumecheng-7594	16	8	capability	capability	NOUN
fumecheng-7594	16	9	are	be	AUX
fumecheng-7594	16	10	also	also	ADV
fumecheng-7594	16	11	considered	consider	VERB
fumecheng-7594	16	12	.	.	PUNCT
fumecheng-7594	17	1	piezo	piezo	ADJ
fumecheng-7594	17	2	-	-	ADJ
fumecheng-7594	17	3	actuated	actuate	VERB
fumecheng-7594	17	4	stick	stick	NOUN
fumecheng-7594	17	5	-	-	PUNCT
fumecheng-7594	17	6	slip	slip	NOUN
fumecheng-7594	17	7	micro	micro	NOUN
fumecheng-7594	17	8	-	-	NOUN
fumecheng-7594	17	9	drives	drive	NOUN
fumecheng-7594	17	10	(	(	PUNCT
fumecheng-7594	17	11	passmds	passmds	NOUN
fumecheng-7594	17	12	)	)	PUNCT
fumecheng-7594	17	13	are	be	AUX
fumecheng-7594	17	14	a	a	DET
fumecheng-7594	17	15	very	very	ADV
fumecheng-7594	17	16	good	good	ADJ
fumecheng-7594	17	17	candidate	candidate	NOUN
fumecheng-7594	17	18	to	to	PART
fumecheng-7594	17	19	solve	solve	VERB
fumecheng-7594	17	20	the	the	DET
fumecheng-7594	17	21	requirements	requirement	NOUN
fumecheng-7594	17	22	mentioned	mention	VERB
fumecheng-7594	17	23	above	above	ADV
fumecheng-7594	17	24	.	.	PUNCT
fumecheng-7594	18	1	passmds	passmds	NOUN
fumecheng-7594	18	2	have	have	VERB
fumecheng-7594	18	3	a	a	DET
fumecheng-7594	18	4	very	very	ADV
fumecheng-7594	18	5	simple	simple	ADJ
fumecheng-7594	18	6	design	design	NOUN
fumecheng-7594	18	7	consisting	consist	VERB
fumecheng-7594	18	8	of	of	ADP
fumecheng-7594	18	9	a	a	DET
fumecheng-7594	18	10	mobile	mobile	ADJ
fumecheng-7594	18	11	part	part	NOUN
fumecheng-7594	18	12	(	(	PUNCT
fumecheng-7594	18	13	the	the	DET
fumecheng-7594	18	14	runner	runner	NOUN
fumecheng-7594	18	15	)	)	PUNCT
fumecheng-7594	18	16	guided	guide	VERB
fumecheng-7594	18	17	and	and	CCONJ
fumecheng-7594	18	18	actuated	actuate	VERB
fumecheng-7594	18	19	by	by	ADP
fumecheng-7594	18	20	the	the	DET
fumecheng-7594	18	21	piezo	piezo	PROPN
fumecheng-7594	18	22	actuators	actuator	NOUN
fumecheng-7594	18	23	(	(	PUNCT
fumecheng-7594	18	24	the	the	DET
fumecheng-7594	18	25	actuator	actuator	NOUN
fumecheng-7594	18	26	)	)	PUNCT
fumecheng-7594	18	27	through	through	ADP
fumecheng-7594	18	28	frictional	frictional	ADJ
fumecheng-7594	18	29	guiding	guide	VERB
fumecheng-7594	18	30	contacts	contact	NOUN
fumecheng-7594	18	31	attached	attach	VERB
fumecheng-7594	18	32	to	to	ADP
fumecheng-7594	18	33	the	the	DET
fumecheng-7594	18	34	piezo	piezo	PROPN
fumecheng-7594	18	35	elements	element	NOUN
fumecheng-7594	18	36	[	[	X
fumecheng-7594	18	37	2	2	NUM
fumecheng-7594	18	38	]	]	PUNCT
fumecheng-7594	18	39	.	.	PUNCT
fumecheng-7594	19	1	motions	motion	NOUN
fumecheng-7594	19	2	of	of	ADP
fumecheng-7594	19	3	the	the	DET
fumecheng-7594	19	4	runner	runner	NOUN
fumecheng-7594	19	5	are	be	AUX
fumecheng-7594	19	6	induced	induce	VERB
fumecheng-7594	19	7	by	by	ADP
fumecheng-7594	19	8	the	the	DET
fumecheng-7594	19	9	deformation	deformation	NOUN
fumecheng-7594	19	10	of	of	ADP
fumecheng-7594	19	11	the	the	DET
fumecheng-7594	19	12	piezo	piezo	PROPN
fumecheng-7594	19	13	elements	element	NOUN
fumecheng-7594	19	14	usually	usually	ADV
fumecheng-7594	19	15	supplied	supply	VERB
fumecheng-7594	19	16	by	by	ADP
fumecheng-7594	19	17	sawtooth	sawtooth	NOUN
fumecheng-7594	19	18	-	-	PUNCT
fumecheng-7594	19	19	like	like	ADJ
fumecheng-7594	19	20	driving	driving	NOUN
fumecheng-7594	19	21	voltages	voltage	NOUN
fumecheng-7594	19	22	.	.	PUNCT
fumecheng-7594	20	1	these	these	DET
fumecheng-7594	20	2	motions	motion	NOUN
fumecheng-7594	20	3	consist	consist	VERB
fumecheng-7594	20	4	of	of	ADP
fumecheng-7594	20	5	a	a	DET
fumecheng-7594	20	6	sequence	sequence	NOUN
fumecheng-7594	20	7	of	of	ADP
fumecheng-7594	20	8	stick	stick	NOUN
fumecheng-7594	20	9	and	and	CCONJ
fumecheng-7594	20	10	slip	slip	VERB
fumecheng-7594	20	11	phases	phase	NOUN
fumecheng-7594	20	12	.	.	PUNCT
fumecheng-7594	21	1	during	during	ADP
fumecheng-7594	21	2	the	the	DET
fumecheng-7594	21	3	stick	stick	NOUN
fumecheng-7594	21	4	phase	phase	NOUN
fumecheng-7594	21	5	,	,	PUNCT
fumecheng-7594	21	6	the	the	DET
fumecheng-7594	21	7	piezo	piezo	X
fumecheng-7594	21	8	elements	element	NOUN
fumecheng-7594	21	9	are	be	AUX
fumecheng-7594	21	10	slowly	slowly	ADV
fumecheng-7594	21	11	elongated	elongate	VERB
fumecheng-7594	21	12	,	,	PUNCT
fumecheng-7594	21	13	which	which	PRON
fumecheng-7594	21	14	makes	make	VERB
fumecheng-7594	21	15	the	the	DET
fumecheng-7594	21	16	runner	runner	NOUN
fumecheng-7594	21	17	to	to	PART
fumecheng-7594	21	18	move	move	VERB
fumecheng-7594	21	19	slowly	slowly	ADV
fumecheng-7594	21	20	along	along	ADV
fumecheng-7594	21	21	with	with	ADP
fumecheng-7594	21	22	the	the	DET
fumecheng-7594	21	23	actuator	actuator	NOUN
fumecheng-7594	21	24	due	due	ADP
fumecheng-7594	21	25	to	to	ADP
fumecheng-7594	21	26	the	the	DET
fumecheng-7594	21	27	static	static	ADJ
fumecheng-7594	21	28	friction	friction	NOUN
fumecheng-7594	21	29	in	in	ADP
fumecheng-7594	21	30	the	the	DET
fumecheng-7594	21	31	contacts	contact	NOUN
fumecheng-7594	21	32	between	between	ADP
fumecheng-7594	21	33	the	the	DET
fumecheng-7594	21	34	runner	runner	NOUN
fumecheng-7594	21	35	’s	’s	PART
fumecheng-7594	21	36	surfaces	surface	NOUN
fumecheng-7594	21	37	and	and	CCONJ
fumecheng-7594	21	38	the	the	DET
fumecheng-7594	21	39	guides	guide	NOUN
fumecheng-7594	21	40	of	of	ADP
fumecheng-7594	21	41	the	the	DET
fumecheng-7594	21	42	actuator	actuator	NOUN
fumecheng-7594	21	43	.	.	PUNCT
fumecheng-7594	22	1	this	this	DET
fumecheng-7594	22	2	phase	phase	NOUN
fumecheng-7594	22	3	is	be	AUX
fumecheng-7594	22	4	followed	follow	VERB
fumecheng-7594	22	5	by	by	ADP
fumecheng-7594	22	6	the	the	DET
fumecheng-7594	22	7	slip	slip	NOUN
fumecheng-7594	22	8	phase	phase	NOUN
fumecheng-7594	22	9	when	when	SCONJ
fumecheng-7594	22	10	the	the	DET
fumecheng-7594	22	11	piezo	piezo	X
fumecheng-7594	22	12	elements	element	NOUN
fumecheng-7594	22	13	are	be	AUX
fumecheng-7594	22	14	rapidly	rapidly	ADV
fumecheng-7594	22	15	contracted	contract	VERB
fumecheng-7594	22	16	.	.	PUNCT
fumecheng-7594	23	1	the	the	DET
fumecheng-7594	23	2	runner	runner	NOUN
fumecheng-7594	23	3	can	can	AUX
fumecheng-7594	23	4	not	not	PART
fumecheng-7594	23	5	follow	follow	VERB
fumecheng-7594	23	6	this	this	DET
fumecheng-7594	23	7	movement	movement	NOUN
fumecheng-7594	23	8	and	and	CCONJ
fumecheng-7594	23	9	thus	thus	ADV
fumecheng-7594	23	10	slides	slide	VERB
fumecheng-7594	23	11	relatively	relatively	ADV
fumecheng-7594	23	12	with	with	ADP
fumecheng-7594	23	13	respect	respect	NOUN
fumecheng-7594	23	14	to	to	ADP
fumecheng-7594	23	15	the	the	DET
fumecheng-7594	23	16	actuators	actuator	NOUN
fumecheng-7594	23	17	.	.	PUNCT
fumecheng-7594	24	1	subsequently	subsequently	ADV
fumecheng-7594	24	2	,	,	PUNCT
fumecheng-7594	24	3	after	after	ADP
fumecheng-7594	24	4	a	a	DET
fumecheng-7594	24	5	small	small	ADJ
fumecheng-7594	24	6	backward	backward	ADJ
fumecheng-7594	24	7	motion	motion	NOUN
fumecheng-7594	24	8	(	(	PUNCT
fumecheng-7594	24	9	back	back	NOUN
fumecheng-7594	24	10	-	-	PUNCT
fumecheng-7594	24	11	step	step	NOUN
fumecheng-7594	24	12	)	)	PUNCT
fumecheng-7594	24	13	,	,	PUNCT
fumecheng-7594	24	14	a	a	DET
fumecheng-7594	24	15	step	step	NOUN
fumecheng-7594	24	16	of	of	ADP
fumecheng-7594	24	17	the	the	DET
fumecheng-7594	24	18	runner	runner	NOUN
fumecheng-7594	24	19	is	be	AUX
fumecheng-7594	24	20	achieved	achieve	VERB
fumecheng-7594	24	21	.	.	PUNCT
fumecheng-7594	25	1	although	although	SCONJ
fumecheng-7594	25	2	the	the	DET
fumecheng-7594	25	3	deformation	deformation	NOUN
fumecheng-7594	25	4	of	of	ADP
fumecheng-7594	25	5	the	the	DET
fumecheng-7594	25	6	piezoelectric	piezoelectric	ADJ
fumecheng-7594	25	7	element	element	NOUN
fumecheng-7594	25	8	is	be	AUX
fumecheng-7594	25	9	small	small	ADJ
fumecheng-7594	25	10	,	,	PUNCT
fumecheng-7594	25	11	this	this	DET
fumecheng-7594	25	12	principle	principle	NOUN
fumecheng-7594	25	13	of	of	ADP
fumecheng-7594	25	14	motion	motion	NOUN
fumecheng-7594	25	15	allows	allow	VERB
fumecheng-7594	25	16	for	for	ADP
fumecheng-7594	25	17	movements	movement	NOUN
fumecheng-7594	25	18	of	of	ADP
fumecheng-7594	25	19	the	the	DET
fumecheng-7594	25	20	runner	runner	NOUN
fumecheng-7594	25	21	with	with	ADP
fumecheng-7594	25	22	a	a	DET
fumecheng-7594	25	23	theoretically	theoretically	ADV
fumecheng-7594	25	24	unlimited	unlimited	ADJ
fumecheng-7594	25	25	range	range	NOUN
fumecheng-7594	25	26	by	by	ADP
fumecheng-7594	25	27	performing	perform	VERB
fumecheng-7594	25	28	many	many	ADJ
fumecheng-7594	25	29	cycles	cycle	NOUN
fumecheng-7594	25	30	of	of	ADP
fumecheng-7594	25	31	the	the	DET
fumecheng-7594	25	32	stick	stick	NOUN
fumecheng-7594	25	33	and	and	CCONJ
fumecheng-7594	25	34	slip	slip	NOUN
fumecheng-7594	25	35	phase	phase	NOUN
fumecheng-7594	25	36	(	(	PUNCT
fumecheng-7594	25	37	stepping	stepping	ADJ
fumecheng-7594	25	38	mode	mode	NOUN
fumecheng-7594	25	39	)	)	PUNCT
fumecheng-7594	25	40	.	.	PUNCT
fumecheng-7594	26	1	also	also	ADV
fumecheng-7594	26	2	,	,	PUNCT
fumecheng-7594	26	3	motions	motion	NOUN
fumecheng-7594	26	4	with	with	ADP
fumecheng-7594	26	5	a	a	DET
fumecheng-7594	26	6	very	very	ADV
fumecheng-7594	26	7	high	high	ADJ
fumecheng-7594	26	8	resolution	resolution	NOUN
fumecheng-7594	26	9	are	be	AUX
fumecheng-7594	26	10	obtained	obtain	VERB
fumecheng-7594	26	11	by	by	ADP
fumecheng-7594	26	12	a	a	DET
fumecheng-7594	26	13	slight	slight	ADJ
fumecheng-7594	26	14	deformation	deformation	NOUN
fumecheng-7594	26	15	of	of	ADP
fumecheng-7594	26	16	the	the	DET
fumecheng-7594	26	17	piezo	piezo	X
fumecheng-7594	26	18	elements	element	NOUN
fumecheng-7594	26	19	within	within	ADP
fumecheng-7594	26	20	the	the	DET
fumecheng-7594	26	21	stick	stick	NOUN
fumecheng-7594	26	22	phase	phase	NOUN
fumecheng-7594	26	23	(	(	PUNCT
fumecheng-7594	26	24	scanning	scan	VERB
fumecheng-7594	26	25	mode	mode	NOUN
fumecheng-7594	26	26	)	)	PUNCT
fumecheng-7594	26	27	.	.	PUNCT
fumecheng-7594	27	1	there	there	PRON
fumecheng-7594	27	2	have	have	AUX
fumecheng-7594	27	3	been	be	AUX
fumecheng-7594	27	4	many	many	ADJ
fumecheng-7594	27	5	prototypes	prototype	NOUN
fumecheng-7594	27	6	as	as	ADV
fumecheng-7594	27	7	well	well	ADV
fumecheng-7594	27	8	as	as	ADP
fumecheng-7594	27	9	commercial	commercial	ADJ
fumecheng-7594	27	10	products	product	NOUN
fumecheng-7594	27	11	of	of	ADP
fumecheng-7594	27	12	passmds	passmds	NOUN
fumecheng-7594	27	13	released	release	VERB
fumecheng-7594	27	14	[	[	PUNCT
fumecheng-7594	27	15	3	3	NUM
fumecheng-7594	27	16	]	]	PUNCT
fumecheng-7594	27	17	.	.	PUNCT
fumecheng-7594	28	1	also	also	ADV
fumecheng-7594	28	2	,	,	PUNCT
fumecheng-7594	28	3	many	many	ADJ
fumecheng-7594	28	4	theoretical	theoretical	ADJ
fumecheng-7594	28	5	investigations	investigation	NOUN
fumecheng-7594	28	6	and	and	CCONJ
fumecheng-7594	28	7	optimizations	optimization	NOUN
fumecheng-7594	28	8	for	for	ADP
fumecheng-7594	28	9	drives	drive	NOUN
fumecheng-7594	28	10	have	have	AUX
fumecheng-7594	28	11	been	be	AUX
fumecheng-7594	28	12	published	publish	VERB
fumecheng-7594	28	13	[	[	PUNCT
fumecheng-7594	28	14	4	4	NUM
fumecheng-7594	28	15	,	,	PUNCT
fumecheng-7594	28	16	5	5	NUM
fumecheng-7594	28	17	]	]	PUNCT
fumecheng-7594	28	18	.	.	PUNCT
fumecheng-7594	29	1	important	important	ADJ
fumecheng-7594	29	2	research	research	NOUN
fumecheng-7594	29	3	and	and	CCONJ
fumecheng-7594	29	4	development	development	NOUN
fumecheng-7594	29	5	topics	topic	NOUN
fumecheng-7594	29	6	are	be	AUX
fumecheng-7594	29	7	briefly	briefly	ADV
fumecheng-7594	29	8	summarized	summarize	VERB
fumecheng-7594	29	9	as	as	SCONJ
fumecheng-7594	29	10	follows	follow	VERB
fumecheng-7594	29	11	:	:	PUNCT
fumecheng-7594	29	12	▪	▪	ADJ
fumecheng-7594	29	13	design	design	NOUN
fumecheng-7594	29	14	and	and	CCONJ
fumecheng-7594	29	15	miniaturization	miniaturization	NOUN
fumecheng-7594	29	16	:	:	PUNCT
fumecheng-7594	29	17	the	the	DET
fumecheng-7594	29	18	monolithic	monolithic	ADJ
fumecheng-7594	29	19	concept	concept	NOUN
fumecheng-7594	29	20	for	for	ADP
fumecheng-7594	29	21	modular	modular	ADJ
fumecheng-7594	29	22	drives	drive	NOUN
fumecheng-7594	29	23	to	to	PART
fumecheng-7594	29	24	reduce	reduce	VERB
fumecheng-7594	29	25	efforts	effort	NOUN
fumecheng-7594	29	26	of	of	ADP
fumecheng-7594	29	27	assembling	assemble	VERB
fumecheng-7594	29	28	micro	micro	NOUN
fumecheng-7594	29	29	-	-	NOUN
fumecheng-7594	29	30	components	component	NOUN
fumecheng-7594	30	1	[	[	X
fumecheng-7594	30	2	6	6	NUM
fumecheng-7594	30	3	]	]	PUNCT
fumecheng-7594	30	4	,	,	PUNCT
fumecheng-7594	30	5	exploitation	exploitation	NOUN
fumecheng-7594	30	6	of	of	ADP
fumecheng-7594	30	7	the	the	DET
fumecheng-7594	30	8	flexure	flexure	NOUN
fumecheng-7594	30	9	-	-	PUNCT
fumecheng-7594	30	10	based	base	VERB
fumecheng-7594	30	11	mechanism	mechanism	NOUN
fumecheng-7594	30	12	for	for	ADP
fumecheng-7594	30	13	adjusting	adjust	VERB
fumecheng-7594	30	14	the	the	DET
fumecheng-7594	30	15	preload	preload	NOUN
fumecheng-7594	30	16	and	and	CCONJ
fumecheng-7594	30	17	thus	thus	ADV
fumecheng-7594	30	18	the	the	DET
fumecheng-7594	30	19	friction	friction	NOUN
fumecheng-7594	30	20	with	with	ADP
fumecheng-7594	30	21	the	the	DET
fumecheng-7594	30	22	aim	aim	NOUN
fumecheng-7594	30	23	of	of	ADP
fumecheng-7594	30	24	increasing	increase	VERB
fumecheng-7594	30	25	step	step	NOUN
fumecheng-7594	30	26	length	length	NOUN
fumecheng-7594	30	27	and	and	CCONJ
fumecheng-7594	30	28	load	load	NOUN
fumecheng-7594	30	29	capacity	capacity	NOUN
fumecheng-7594	31	1	[	[	X
fumecheng-7594	31	2	7	7	NUM
fumecheng-7594	31	3	]	]	PUNCT
fumecheng-7594	31	4	,	,	PUNCT
fumecheng-7594	31	5	▪	▪	ADJ
fumecheng-7594	31	6	waveform	waveform	VERB
fumecheng-7594	31	7	and	and	CCONJ
fumecheng-7594	31	8	driving	drive	VERB
fumecheng-7594	31	9	electronics	electronic	NOUN
fumecheng-7594	31	10	optimization	optimization	NOUN
fumecheng-7594	31	11	:	:	PUNCT
fumecheng-7594	31	12	new	new	ADJ
fumecheng-7594	31	13	driving	driving	NOUN
fumecheng-7594	31	14	waveforms	waveform	VERB
fumecheng-7594	31	15	for	for	ADP
fumecheng-7594	31	16	maximal	maximal	ADJ
fumecheng-7594	31	17	velocity	velocity	NOUN
fumecheng-7594	31	18	[	[	X
fumecheng-7594	31	19	8	8	NUM
fumecheng-7594	31	20	-	-	SYM
fumecheng-7594	31	21	10	10	NUM
fumecheng-7594	31	22	]	]	PUNCT
fumecheng-7594	31	23	,	,	PUNCT
fumecheng-7594	31	24	optimized	optimize	VERB
fumecheng-7594	31	25	driving	driving	NOUN
fumecheng-7594	31	26	electronics	electronic	NOUN
fumecheng-7594	31	27	for	for	ADP
fumecheng-7594	31	28	reducing	reduce	VERB
fumecheng-7594	31	29	the	the	DET
fumecheng-7594	31	30	slew	slew	ADJ
fumecheng-7594	31	31	-	-	PUNCT
fumecheng-7594	31	32	rate	rate	NOUN
fumecheng-7594	31	33	and	and	CCONJ
fumecheng-7594	31	34	thus	thus	ADV
fumecheng-7594	31	35	increasing	increase	VERB
fumecheng-7594	31	36	the	the	DET
fumecheng-7594	31	37	step	step	NOUN
fumecheng-7594	31	38	length	length	NOUN
fumecheng-7594	31	39	and	and	CCONJ
fumecheng-7594	31	40	velocity	velocity	NOUN
fumecheng-7594	31	41	[	[	X
fumecheng-7594	31	42	11	11	NUM
fumecheng-7594	31	43	]	]	PUNCT
fumecheng-7594	31	44	,	,	PUNCT
fumecheng-7594	31	45	▪	▪	NOUN
fumecheng-7594	31	46	physical	physical	ADJ
fumecheng-7594	31	47	modeling	modeling	NOUN
fumecheng-7594	31	48	and	and	CCONJ
fumecheng-7594	31	49	simulation	simulation	NOUN
fumecheng-7594	31	50	:	:	PUNCT
fumecheng-7594	31	51	modeling	model	VERB
fumecheng-7594	31	52	the	the	DET
fumecheng-7594	31	53	friction	friction	NOUN
fumecheng-7594	31	54	in	in	ADP
fumecheng-7594	31	55	the	the	DET
fumecheng-7594	31	56	guiding	guide	VERB
fumecheng-7594	31	57	contacts	contact	NOUN
fumecheng-7594	31	58	using	use	VERB
fumecheng-7594	31	59	coulomb	coulomb	NOUN
fumecheng-7594	31	60	model	model	NOUN
fumecheng-7594	31	61	[	[	X
fumecheng-7594	31	62	12	12	NUM
fumecheng-7594	31	63	,	,	PUNCT
fumecheng-7594	31	64	13	13	NUM
fumecheng-7594	31	65	]	]	PUNCT
fumecheng-7594	31	66	,	,	PUNCT
fumecheng-7594	31	67	single	single	ADJ
fumecheng-7594	31	68	state	state	NOUN
fumecheng-7594	31	69	friction	friction	NOUN
fumecheng-7594	31	70	model	model	NOUN
fumecheng-7594	31	71	[	[	X
fumecheng-7594	31	72	14	14	NUM
fumecheng-7594	31	73	-	-	SYM
fumecheng-7594	31	74	16	16	NUM
fumecheng-7594	31	75	]	]	PUNCT
fumecheng-7594	31	76	,	,	PUNCT
fumecheng-7594	31	77	tangential	tangential	ADJ
fumecheng-7594	31	78	contact	contact	NOUN
fumecheng-7594	31	79	mechanics	mechanic	NOUN
fumecheng-7594	31	80	with	with	ADP
fumecheng-7594	31	81	the	the	DET
fumecheng-7594	31	82	method	method	NOUN
fumecheng-7594	31	83	of	of	ADP
fumecheng-7594	31	84	dimensionality	dimensionality	NOUN
fumecheng-7594	31	85	reduction	reduction	NOUN
fumecheng-7594	31	86	for	for	ADP
fumecheng-7594	31	87	hybrid	hybrid	ADJ
fumecheng-7594	31	88	dynamic	dynamic	ADJ
fumecheng-7594	31	89	simulations	simulation	NOUN
fumecheng-7594	31	90	[	[	X
fumecheng-7594	31	91	3	3	NUM
fumecheng-7594	31	92	,	,	PUNCT
fumecheng-7594	31	93	10	10	NUM
fumecheng-7594	31	94	,	,	PUNCT
fumecheng-7594	31	95	17	17	NUM
fumecheng-7594	31	96	-	-	SYM
fumecheng-7594	31	97	20	20	NUM
fumecheng-7594	31	98	]	]	PUNCT
fumecheng-7594	31	99	.	.	PUNCT
fumecheng-7594	32	1	among	among	ADP
fumecheng-7594	32	2	these	these	DET
fumecheng-7594	32	3	topics	topic	NOUN
fumecheng-7594	32	4	,	,	PUNCT
fumecheng-7594	32	5	the	the	DET
fumecheng-7594	32	6	physical	physical	ADJ
fumecheng-7594	32	7	modeling	modeling	NOUN
fumecheng-7594	32	8	is	be	AUX
fumecheng-7594	32	9	the	the	DET
fumecheng-7594	32	10	most	most	ADV
fumecheng-7594	32	11	important	important	ADJ
fumecheng-7594	32	12	because	because	SCONJ
fumecheng-7594	32	13	it	it	PRON
fumecheng-7594	32	14	can	can	AUX
fumecheng-7594	32	15	theoretically	theoretically	ADV
fumecheng-7594	32	16	explain	explain	VERB
fumecheng-7594	32	17	important	important	ADJ
fumecheng-7594	32	18	characteristics	characteristic	NOUN
fumecheng-7594	32	19	of	of	ADP
fumecheng-7594	32	20	the	the	DET
fumecheng-7594	32	21	stick	stick	NOUN
fumecheng-7594	32	22	-	-	PUNCT
fumecheng-7594	32	23	slip	slip	NOUN
fumecheng-7594	32	24	drives	drive	NOUN
fumecheng-7594	32	25	experimentally	experimentally	ADV
fumecheng-7594	32	26	detected	detect	VERB
fumecheng-7594	32	27	such	such	ADJ
fumecheng-7594	32	28	as	as	ADP
fumecheng-7594	32	29	:	:	PUNCT
fumecheng-7594	32	30	i	i	NOUN
fumecheng-7594	32	31	)	)	PUNCT
fumecheng-7594	32	32	the	the	DET
fumecheng-7594	32	33	so	so	ADV
fumecheng-7594	32	34	-	-	PUNCT
fumecheng-7594	32	35	called	call	VERB
fumecheng-7594	32	36	0	0	NUM
fumecheng-7594	32	37	-	-	PUNCT
fumecheng-7594	32	38	amplitude	amplitude	NOUN
fumecheng-7594	32	39	[	[	NOUN
fumecheng-7594	32	40	10	10	NUM
fumecheng-7594	32	41	,	,	PUNCT
fumecheng-7594	32	42	19	19	NUM
fumecheng-7594	32	43	,	,	PUNCT
fumecheng-7594	32	44	21	21	NUM
fumecheng-7594	32	45	]	]	PUNCT
fumecheng-7594	32	46	/critical	/critical	PUNCT
fumecheng-7594	32	47	amplitude	amplitude	NOUN
fumecheng-7594	32	48	[	[	X
fumecheng-7594	32	49	20	20	NUM
fumecheng-7594	32	50	]	]	PUNCT
fumecheng-7594	32	51	which	which	PRON
fumecheng-7594	32	52	relates	relate	VERB
fumecheng-7594	32	53	directly	directly	ADV
fumecheng-7594	32	54	to	to	ADP
fumecheng-7594	32	55	the	the	DET
fumecheng-7594	32	56	presliding	preslide	VERB
fumecheng-7594	32	57	displacement	displacement	NOUN
fumecheng-7594	32	58	of	of	ADP
fumecheng-7594	32	59	guiding	guide	VERB
fumecheng-7594	32	60	contacts	contact	NOUN
fumecheng-7594	32	61	and	and	CCONJ
fumecheng-7594	32	62	the	the	DET
fumecheng-7594	32	63	dynamic	dynamic	ADJ
fumecheng-7594	32	64	behavior	behavior	NOUN
fumecheng-7594	32	65	of	of	ADP
fumecheng-7594	32	66	the	the	DET
fumecheng-7594	32	67	piezo	piezo	X
fumecheng-7594	32	68	actuators	actuator	NOUN
fumecheng-7594	32	69	.	.	PUNCT
fumecheng-7594	33	1	the	the	DET
fumecheng-7594	33	2	state	state	NOUN
fumecheng-7594	33	3	-	-	PUNCT
fumecheng-7594	33	4	of	of	ADP
fumecheng-7594	33	5	-	-	PUNCT
fumecheng-7594	33	6	the	the	DET
fumecheng-7594	33	7	-	-	PUNCT
fumecheng-7594	33	8	art	art	NOUN
fumecheng-7594	33	9	explanation	explanation	NOUN
fumecheng-7594	33	10	for	for	ADP
fumecheng-7594	33	11	this	this	DET
fumecheng-7594	33	12	phenomenon	phenomenon	NOUN
fumecheng-7594	33	13	can	can	AUX
fumecheng-7594	33	14	be	be	AUX
fumecheng-7594	33	15	found	find	VERB
fumecheng-7594	33	16	in	in	ADP
fumecheng-7594	33	17	[	[	X
fumecheng-7594	33	18	20	20	NUM
fumecheng-7594	33	19	]	]	PUNCT
fumecheng-7594	33	20	;	;	PUNCT
fumecheng-7594	33	21	ii	ii	X
fumecheng-7594	33	22	)	)	PUNCT
fumecheng-7594	33	23	the	the	DET
fumecheng-7594	33	24	micro	micro	NOUN
fumecheng-7594	33	25	-	-	NOUN
fumecheng-7594	33	26	vibration	vibration	NOUN
fumecheng-7594	33	27	and	and	CCONJ
fumecheng-7594	33	28	the	the	DET
fumecheng-7594	33	29	maximal	maximal	ADJ
fumecheng-7594	33	30	achievable	achievable	ADJ
fumecheng-7594	33	31	driving	drive	VERB
fumecheng-7594	33	32	frequency	frequency	NOUN
fumecheng-7594	33	33	[	[	X
fumecheng-7594	33	34	10	10	NUM
fumecheng-7594	33	35	,	,	PUNCT
fumecheng-7594	33	36	20	20	NUM
fumecheng-7594	33	37	]	]	PUNCT
fumecheng-7594	33	38	;	;	PUNCT
fumecheng-7594	33	39	iii	iii	X
fumecheng-7594	33	40	)	)	PUNCT
fumecheng-7594	33	41	the	the	DET
fumecheng-7594	33	42	repeatability	repeatability	NOUN
fumecheng-7594	33	43	–	–	PUNCT
fumecheng-7594	33	44	an	an	DET
fumecheng-7594	33	45	evaluation	evaluation	NOUN
fumecheng-7594	33	46	criterion	criterion	NOUN
fumecheng-7594	33	47	for	for	ADP
fumecheng-7594	33	48	the	the	DET
fumecheng-7594	33	49	changing	changing	NOUN
fumecheng-7594	33	50	of	of	ADP
fumecheng-7594	33	51	the	the	DET
fumecheng-7594	33	52	step	step	NOUN
fumecheng-7594	33	53	length	length	NOUN
fumecheng-7594	33	54	after	after	ADP
fumecheng-7594	33	55	each	each	DET
fumecheng-7594	33	56	investigation	investigation	NOUN
fumecheng-7594	33	57	of	of	ADP
fumecheng-7594	33	58	influences	influence	NOUN
fumecheng-7594	33	59	of	of	ADP
fumecheng-7594	33	60	fabrication	fabrication	NOUN
fumecheng-7594	33	61	tolerances	tolerance	NOUN
fumecheng-7594	33	62	on	on	ADP
fumecheng-7594	33	63	operational	operational	ADJ
fumecheng-7594	33	64	characteristics	characteristic	NOUN
fumecheng-7594	33	65	of	of	ADP
fumecheng-7594	33	66	piezo	piezo	NOUN
fumecheng-7594	33	67	-	-	ADJ
fumecheng-7594	33	68	actuated	actuated	ADJ
fumecheng-7594	33	69	...	...	PUNCT
fumecheng-7594	33	70	111	111	NUM
fumecheng-7594	33	71	step	step	NOUN
fumecheng-7594	33	72	which	which	PRON
fumecheng-7594	33	73	is	be	AUX
fumecheng-7594	33	74	believed	believe	VERB
fumecheng-7594	33	75	to	to	PART
fumecheng-7594	33	76	relate	relate	VERB
fumecheng-7594	33	77	to	to	ADP
fumecheng-7594	33	78	the	the	DET
fumecheng-7594	33	79	tolerance	tolerance	NOUN
fumecheng-7594	33	80	of	of	ADP
fumecheng-7594	33	81	the	the	DET
fumecheng-7594	33	82	fabrication	fabrication	NOUN
fumecheng-7594	33	83	and	and	CCONJ
fumecheng-7594	33	84	assembly	assembly	NOUN
fumecheng-7594	33	85	of	of	ADP
fumecheng-7594	33	86	microcomponents	microcomponent	NOUN
fumecheng-7594	33	87	of	of	ADP
fumecheng-7594	33	88	the	the	DET
fumecheng-7594	33	89	drives	drive	NOUN
fumecheng-7594	33	90	.	.	PUNCT
fumecheng-7594	34	1	this	this	DET
fumecheng-7594	34	2	phenomenon	phenomenon	NOUN
fumecheng-7594	34	3	has	have	AUX
fumecheng-7594	34	4	not	not	PART
fumecheng-7594	34	5	been	be	AUX
fumecheng-7594	34	6	physically	physically	ADV
fumecheng-7594	34	7	analyzed	analyze	VERB
fumecheng-7594	34	8	yet	yet	ADV
fumecheng-7594	34	9	.	.	PUNCT
fumecheng-7594	35	1	the	the	DET
fumecheng-7594	35	2	fabrication	fabrication	NOUN
fumecheng-7594	35	3	tolerance	tolerance	NOUN
fumecheng-7594	35	4	is	be	AUX
fumecheng-7594	35	5	determined	determine	VERB
fumecheng-7594	35	6	by	by	ADP
fumecheng-7594	35	7	the	the	DET
fumecheng-7594	35	8	micro	micro	NOUN
fumecheng-7594	35	9	-	-	NOUN
fumecheng-7594	35	10	machining	machining	NOUN
fumecheng-7594	35	11	of	of	ADP
fumecheng-7594	35	12	micro	micro	NOUN
fumecheng-7594	35	13	-	-	NOUN
fumecheng-7594	35	14	parts	part	NOUN
fumecheng-7594	35	15	as	as	ADV
fumecheng-7594	35	16	well	well	ADV
fumecheng-7594	35	17	as	as	ADP
fumecheng-7594	35	18	their	their	PRON
fumecheng-7594	35	19	assembly	assembly	NOUN
fumecheng-7594	35	20	processes	process	NOUN
fumecheng-7594	35	21	typically	typically	ADV
fumecheng-7594	35	22	performed	perform	VERB
fumecheng-7594	35	23	in	in	ADP
fumecheng-7594	35	24	manual	manual	ADJ
fumecheng-7594	35	25	ways	way	NOUN
fumecheng-7594	35	26	.	.	PUNCT
fumecheng-7594	36	1	this	this	PRON
fumecheng-7594	36	2	leads	lead	VERB
fumecheng-7594	36	3	to	to	ADP
fumecheng-7594	36	4	the	the	DET
fumecheng-7594	36	5	fact	fact	NOUN
fumecheng-7594	36	6	that	that	SCONJ
fumecheng-7594	36	7	the	the	DET
fumecheng-7594	36	8	tolerance	tolerance	NOUN
fumecheng-7594	36	9	of	of	ADP
fumecheng-7594	36	10	manufactured	manufacture	VERB
fumecheng-7594	36	11	drives	drive	NOUN
fumecheng-7594	36	12	is	be	AUX
fumecheng-7594	36	13	very	very	ADV
fumecheng-7594	36	14	fluctuated	fluctuated	ADJ
fumecheng-7594	36	15	,	,	PUNCT
fumecheng-7594	36	16	influencing	influence	VERB
fumecheng-7594	36	17	significantly	significantly	ADV
fumecheng-7594	36	18	on	on	ADP
fumecheng-7594	36	19	the	the	DET
fumecheng-7594	36	20	operational	operational	ADJ
fumecheng-7594	36	21	characteristics	characteristic	NOUN
fumecheng-7594	36	22	of	of	ADP
fumecheng-7594	36	23	the	the	DET
fumecheng-7594	36	24	drives	drive	NOUN
fumecheng-7594	36	25	.	.	PUNCT
fumecheng-7594	37	1	to	to	ADP
fumecheng-7594	37	2	our	our	PRON
fumecheng-7594	37	3	knowledge	knowledge	NOUN
fumecheng-7594	37	4	,	,	PUNCT
fumecheng-7594	37	5	there	there	PRON
fumecheng-7594	37	6	has	have	AUX
fumecheng-7594	37	7	not	not	PART
fumecheng-7594	37	8	been	be	AUX
fumecheng-7594	37	9	any	any	DET
fumecheng-7594	37	10	investigation	investigation	NOUN
fumecheng-7594	37	11	considering	consider	VERB
fumecheng-7594	37	12	the	the	DET
fumecheng-7594	37	13	influences	influence	NOUN
fumecheng-7594	37	14	of	of	ADP
fumecheng-7594	37	15	fabrication	fabrication	NOUN
fumecheng-7594	37	16	tolerances	tolerance	NOUN
fumecheng-7594	37	17	on	on	ADP
fumecheng-7594	37	18	operational	operational	ADJ
fumecheng-7594	37	19	characteristics	characteristic	NOUN
fumecheng-7594	37	20	of	of	ADP
fumecheng-7594	37	21	passmds	passmds	NOUN
fumecheng-7594	37	22	.	.	PUNCT
fumecheng-7594	38	1	in	in	ADP
fumecheng-7594	38	2	this	this	DET
fumecheng-7594	38	3	work	work	NOUN
fumecheng-7594	38	4	,	,	PUNCT
fumecheng-7594	38	5	the	the	DET
fumecheng-7594	38	6	influences	influence	NOUN
fumecheng-7594	38	7	of	of	ADP
fumecheng-7594	38	8	fabrication	fabrication	NOUN
fumecheng-7594	38	9	tolerances	tolerance	NOUN
fumecheng-7594	38	10	on	on	ADP
fumecheng-7594	38	11	the	the	DET
fumecheng-7594	38	12	above	above	ADV
fumecheng-7594	38	13	-	-	PUNCT
fumecheng-7594	38	14	mentioned	mention	VERB
fumecheng-7594	38	15	operational	operational	ADJ
fumecheng-7594	38	16	characteristics	characteristic	NOUN
fumecheng-7594	38	17	of	of	ADP
fumecheng-7594	38	18	the	the	DET
fumecheng-7594	38	19	passmds	passmds	NOUN
fumecheng-7594	38	20	are	be	AUX
fumecheng-7594	38	21	theoretically	theoretically	ADV
fumecheng-7594	38	22	investigated	investigate	VERB
fumecheng-7594	38	23	.	.	PUNCT
fumecheng-7594	39	1	based	base	VERB
fumecheng-7594	39	2	on	on	ADP
fumecheng-7594	39	3	previously	previously	ADV
fumecheng-7594	39	4	published	publish	VERB
fumecheng-7594	39	5	works	work	NOUN
fumecheng-7594	39	6	[	[	X
fumecheng-7594	39	7	10	10	NUM
fumecheng-7594	39	8	,	,	PUNCT
fumecheng-7594	39	9	18	18	NUM
fumecheng-7594	39	10	-	-	SYM
fumecheng-7594	39	11	20	20	NUM
fumecheng-7594	39	12	]	]	PUNCT
fumecheng-7594	39	13	,	,	PUNCT
fumecheng-7594	39	14	an	an	DET
fumecheng-7594	39	15	experimental	experimental	ADJ
fumecheng-7594	39	16	platform	platform	NOUN
fumecheng-7594	39	17	having	have	VERB
fumecheng-7594	39	18	a	a	DET
fumecheng-7594	39	19	linear	linear	ADJ
fumecheng-7594	39	20	stick	stick	NOUN
fumecheng-7594	39	21	-	-	PUNCT
fumecheng-7594	39	22	slip	slip	NOUN
fumecheng-7594	39	23	micro	micro	NOUN
fumecheng-7594	39	24	-	-	NOUN
fumecheng-7594	39	25	drive	drive	NOUN
fumecheng-7594	39	26	,	,	PUNCT
fumecheng-7594	39	27	in	in	ADP
fumecheng-7594	39	28	which	which	PRON
fumecheng-7594	39	29	a	a	DET
fumecheng-7594	39	30	runner	runner	NOUN
fumecheng-7594	39	31	is	be	AUX
fumecheng-7594	39	32	guided	guide	VERB
fumecheng-7594	39	33	and	and	CCONJ
fumecheng-7594	39	34	driven	drive	VERB
fumecheng-7594	39	35	by	by	ADP
fumecheng-7594	39	36	six	six	NUM
fumecheng-7594	39	37	piezo	piezo	NOUN
fumecheng-7594	39	38	-	-	NOUN
fumecheng-7594	39	39	actuators	actuator	NOUN
fumecheng-7594	39	40	,	,	PUNCT
fumecheng-7594	39	41	was	be	AUX
fumecheng-7594	39	42	illustrated	illustrate	VERB
fumecheng-7594	39	43	.	.	PUNCT
fumecheng-7594	40	1	a	a	DET
fumecheng-7594	40	2	hybrid	hybrid	ADJ
fumecheng-7594	40	3	-	-	PUNCT
fumecheng-7594	40	4	dynamic	dynamic	ADJ
fumecheng-7594	40	5	model	model	NOUN
fumecheng-7594	40	6	[	[	X
fumecheng-7594	40	7	10	10	NUM
fumecheng-7594	40	8	,	,	PUNCT
fumecheng-7594	40	9	18	18	NUM
fumecheng-7594	40	10	-	-	SYM
fumecheng-7594	40	11	20	20	NUM
fumecheng-7594	40	12	]	]	PUNCT
fumecheng-7594	40	13	,	,	PUNCT
fumecheng-7594	40	14	which	which	PRON
fumecheng-7594	40	15	allows	allow	VERB
fumecheng-7594	40	16	us	we	PRON
fumecheng-7594	40	17	to	to	PART
fumecheng-7594	40	18	simulate	simulate	VERB
fumecheng-7594	40	19	the	the	DET
fumecheng-7594	40	20	overall	overall	ADJ
fumecheng-7594	40	21	macroscopic	macroscopic	ADJ
fumecheng-7594	40	22	movements	movement	NOUN
fumecheng-7594	40	23	of	of	ADP
fumecheng-7594	40	24	the	the	DET
fumecheng-7594	40	25	runner	runner	NOUN
fumecheng-7594	40	26	and	and	CCONJ
fumecheng-7594	40	27	the	the	DET
fumecheng-7594	40	28	microscopic	microscopic	ADJ
fumecheng-7594	40	29	behavior	behavior	NOUN
fumecheng-7594	40	30	of	of	ADP
fumecheng-7594	40	31	guiding	guide	VERB
fumecheng-7594	40	32	contacts	contact	NOUN
fumecheng-7594	40	33	,	,	PUNCT
fumecheng-7594	40	34	was	be	AUX
fumecheng-7594	40	35	used	use	VERB
fumecheng-7594	40	36	.	.	PUNCT
fumecheng-7594	41	1	the	the	DET
fumecheng-7594	41	2	angle	angle	NOUN
fumecheng-7594	41	3	between	between	ADP
fumecheng-7594	41	4	the	the	DET
fumecheng-7594	41	5	working	work	VERB
fumecheng-7594	41	6	surfaces	surface	NOUN
fumecheng-7594	41	7	of	of	ADP
fumecheng-7594	41	8	the	the	DET
fumecheng-7594	41	9	runner	runner	NOUN
fumecheng-7594	41	10	,	,	PUNCT
fumecheng-7594	41	11	the	the	DET
fumecheng-7594	41	12	alignment	alignment	NOUN
fumecheng-7594	41	13	angle	angle	NOUN
fumecheng-7594	41	14	between	between	ADP
fumecheng-7594	41	15	two	two	NUM
fumecheng-7594	41	16	actuator	actuator	NOUN
fumecheng-7594	41	17	blocks	block	NOUN
fumecheng-7594	41	18	,	,	PUNCT
fumecheng-7594	41	19	and	and	CCONJ
fumecheng-7594	41	20	the	the	DET
fumecheng-7594	41	21	stiffness	stiffness	NOUN
fumecheng-7594	41	22	and	and	CCONJ
fumecheng-7594	41	23	damping	damp	VERB
fumecheng-7594	41	24	ratio	ratio	NOUN
fumecheng-7594	41	25	of	of	ADP
fumecheng-7594	41	26	an	an	DET
fumecheng-7594	41	27	individual	individual	ADJ
fumecheng-7594	41	28	actuator	actuator	NOUN
fumecheng-7594	41	29	,	,	PUNCT
fumecheng-7594	41	30	which	which	PRON
fumecheng-7594	41	31	are	be	AUX
fumecheng-7594	41	32	impacted	impact	VERB
fumecheng-7594	41	33	by	by	ADP
fumecheng-7594	41	34	the	the	DET
fumecheng-7594	41	35	fabrication	fabrication	NOUN
fumecheng-7594	41	36	and	and	CCONJ
fumecheng-7594	41	37	assembly	assembly	NOUN
fumecheng-7594	41	38	tolerances	tolerance	NOUN
fumecheng-7594	41	39	,	,	PUNCT
fumecheng-7594	41	40	were	be	AUX
fumecheng-7594	41	41	considered	consider	VERB
fumecheng-7594	41	42	.	.	PUNCT
fumecheng-7594	42	1	influences	influence	NOUN
fumecheng-7594	42	2	of	of	ADP
fumecheng-7594	42	3	these	these	DET
fumecheng-7594	42	4	parameters	parameter	NOUN
fumecheng-7594	42	5	on	on	ADP
fumecheng-7594	42	6	operational	operational	ADJ
fumecheng-7594	42	7	characteristics	characteristic	NOUN
fumecheng-7594	42	8	of	of	ADP
fumecheng-7594	42	9	the	the	DET
fumecheng-7594	42	10	drive	drive	NOUN
fumecheng-7594	42	11	,	,	PUNCT
fumecheng-7594	42	12	including	include	VERB
fumecheng-7594	42	13	the	the	DET
fumecheng-7594	42	14	fluctuation	fluctuation	NOUN
fumecheng-7594	42	15	of	of	ADP
fumecheng-7594	42	16	the	the	DET
fumecheng-7594	42	17	step	step	NOUN
fumecheng-7594	42	18	length	length	NOUN
fumecheng-7594	42	19	,	,	PUNCT
fumecheng-7594	42	20	the	the	DET
fumecheng-7594	42	21	critical	critical	ADJ
fumecheng-7594	42	22	amplitude	amplitude	NOUN
fumecheng-7594	42	23	and	and	CCONJ
fumecheng-7594	42	24	the	the	DET
fumecheng-7594	42	25	maximal	maximal	ADJ
fumecheng-7594	42	26	achievable	achievable	ADJ
fumecheng-7594	42	27	driving	driving	NOUN
fumecheng-7594	42	28	frequency	frequency	NOUN
fumecheng-7594	42	29	are	be	AUX
fumecheng-7594	42	30	analyzed	analyze	VERB
fumecheng-7594	42	31	and	and	CCONJ
fumecheng-7594	42	32	presented	present	VERB
fumecheng-7594	42	33	.	.	PUNCT
fumecheng-7594	43	1	2	2	X
fumecheng-7594	43	2	.	.	X
fumecheng-7594	43	3	experimental	experimental	ADJ
fumecheng-7594	43	4	implementation	implementation	NOUN
fumecheng-7594	43	5	2.1	2.1	NUM
fumecheng-7594	43	6	.	.	PUNCT
fumecheng-7594	44	1	experimental	experimental	ADJ
fumecheng-7594	44	2	platform	platform	NOUN
fumecheng-7594	44	3	the	the	DET
fumecheng-7594	44	4	experimental	experimental	ADJ
fumecheng-7594	44	5	platform	platform	NOUN
fumecheng-7594	44	6	used	use	VERB
fumecheng-7594	44	7	in	in	ADP
fumecheng-7594	44	8	this	this	DET
fumecheng-7594	44	9	work	work	NOUN
fumecheng-7594	44	10	is	be	AUX
fumecheng-7594	44	11	the	the	DET
fumecheng-7594	44	12	result	result	NOUN
fumecheng-7594	44	13	of	of	ADP
fumecheng-7594	44	14	the	the	DET
fumecheng-7594	44	15	work	work	NOUN
fumecheng-7594	44	16	of	of	ADP
fumecheng-7594	44	17	edeler	edeler	NOUN
fumecheng-7594	44	18	[	[	X
fumecheng-7594	44	19	16	16	NUM
fumecheng-7594	44	20	]	]	PUNCT
fumecheng-7594	44	21	and	and	CCONJ
fumecheng-7594	44	22	the	the	DET
fumecheng-7594	44	23	adaption	adaption	NOUN
fumecheng-7594	44	24	of	of	ADP
fumecheng-7594	44	25	our	our	PRON
fumecheng-7594	44	26	previously	previously	ADV
fumecheng-7594	44	27	published	publish	VERB
fumecheng-7594	44	28	works	work	NOUN
fumecheng-7594	44	29	[	[	X
fumecheng-7594	44	30	3	3	NUM
fumecheng-7594	44	31	,	,	PUNCT
fumecheng-7594	44	32	10	10	NUM
fumecheng-7594	44	33	]	]	PUNCT
fumecheng-7594	44	34	.	.	PUNCT
fumecheng-7594	45	1	some	some	DET
fumecheng-7594	45	2	measurement	measurement	NOUN
fumecheng-7594	45	3	results	result	NOUN
fumecheng-7594	45	4	of	of	ADP
fumecheng-7594	45	5	these	these	DET
fumecheng-7594	45	6	works	work	NOUN
fumecheng-7594	45	7	are	be	AUX
fumecheng-7594	45	8	shown	show	VERB
fumecheng-7594	45	9	in	in	ADP
fumecheng-7594	45	10	this	this	DET
fumecheng-7594	45	11	paper	paper	NOUN
fumecheng-7594	45	12	for	for	ADP
fumecheng-7594	45	13	the	the	DET
fumecheng-7594	45	14	first	first	ADJ
fumecheng-7594	45	15	time	time	NOUN
fumecheng-7594	45	16	.	.	PUNCT
fumecheng-7594	46	1	for	for	ADP
fumecheng-7594	46	2	the	the	DET
fumecheng-7594	46	3	convenience	convenience	NOUN
fumecheng-7594	46	4	of	of	ADP
fumecheng-7594	46	5	readers	reader	NOUN
fumecheng-7594	46	6	,	,	PUNCT
fumecheng-7594	46	7	a	a	DET
fumecheng-7594	46	8	brief	brief	ADJ
fumecheng-7594	46	9	description	description	NOUN
fumecheng-7594	46	10	of	of	ADP
fumecheng-7594	46	11	the	the	DET
fumecheng-7594	46	12	system	system	NOUN
fumecheng-7594	46	13	is	be	AUX
fumecheng-7594	46	14	presented	present	VERB
fumecheng-7594	46	15	.	.	PUNCT
fumecheng-7594	47	1	the	the	DET
fumecheng-7594	47	2	investigated	investigate	VERB
fumecheng-7594	47	3	drive	drive	NOUN
fumecheng-7594	47	4	is	be	AUX
fumecheng-7594	47	5	a	a	DET
fumecheng-7594	47	6	linear	linear	ADJ
fumecheng-7594	47	7	micro	micro	ADJ
fumecheng-7594	47	8	-	-	ADJ
fumecheng-7594	47	9	positioning	positioning	ADJ
fumecheng-7594	47	10	device	device	NOUN
fumecheng-7594	47	11	.	.	PUNCT
fumecheng-7594	48	1	the	the	DET
fumecheng-7594	48	2	device	device	NOUN
fumecheng-7594	48	3	consists	consist	VERB
fumecheng-7594	48	4	of	of	ADP
fumecheng-7594	48	5	a	a	DET
fumecheng-7594	48	6	runner	runner	NOUN
fumecheng-7594	48	7	which	which	PRON
fumecheng-7594	48	8	is	be	AUX
fumecheng-7594	48	9	guided	guide	VERB
fumecheng-7594	48	10	and	and	CCONJ
fumecheng-7594	48	11	driven	drive	VERB
fumecheng-7594	48	12	by	by	ADP
fumecheng-7594	48	13	six	six	NUM
fumecheng-7594	48	14	piezoelectric	piezoelectric	ADJ
fumecheng-7594	48	15	micro	micro	NOUN
fumecheng-7594	48	16	-	-	NOUN
fumecheng-7594	48	17	actuators	actuator	NOUN
fumecheng-7594	48	18	,	,	PUNCT
fumecheng-7594	48	19	as	as	SCONJ
fumecheng-7594	48	20	shown	show	VERB
fumecheng-7594	48	21	in	in	ADP
fumecheng-7594	48	22	fig	fig	NOUN
fumecheng-7594	48	23	.	.	PUNCT
fumecheng-7594	49	1	1	1	X
fumecheng-7594	49	2	.	.	X
fumecheng-7594	49	3	each	each	DET
fumecheng-7594	49	4	actuator	actuator	NOUN
fumecheng-7594	49	5	is	be	AUX
fumecheng-7594	49	6	constructed	construct	VERB
fumecheng-7594	49	7	by	by	ADP
fumecheng-7594	49	8	a	a	DET
fumecheng-7594	49	9	ruby	ruby	PROPN
fumecheng-7594	49	10	hemisphere	hemisphere	ADV
fumecheng-7594	49	11	glued	glue	VERB
fumecheng-7594	49	12	on	on	ADP
fumecheng-7594	49	13	segments	segment	NOUN
fumecheng-7594	49	14	of	of	ADP
fumecheng-7594	49	15	a	a	DET
fumecheng-7594	49	16	structured	structure	VERB
fumecheng-7594	49	17	piezo	piezo	X
fumecheng-7594	49	18	element	element	NOUN
fumecheng-7594	49	19	.	.	PUNCT
fumecheng-7594	50	1	these	these	DET
fumecheng-7594	50	2	actuators	actuator	NOUN
fumecheng-7594	50	3	are	be	AUX
fumecheng-7594	50	4	arranged	arrange	VERB
fumecheng-7594	50	5	on	on	ADP
fumecheng-7594	50	6	both	both	DET
fumecheng-7594	50	7	sides	side	NOUN
fumecheng-7594	50	8	of	of	ADP
fumecheng-7594	50	9	the	the	DET
fumecheng-7594	50	10	runner	runner	NOUN
fumecheng-7594	50	11	,	,	PUNCT
fumecheng-7594	50	12	four	four	NUM
fumecheng-7594	50	13	actuators	actuator	NOUN
fumecheng-7594	50	14	on	on	ADP
fumecheng-7594	50	15	the	the	DET
fumecheng-7594	50	16	left	left	ADJ
fumecheng-7594	50	17	and	and	CCONJ
fumecheng-7594	50	18	two	two	NUM
fumecheng-7594	50	19	actuators	actuator	NOUN
fumecheng-7594	50	20	on	on	ADP
fumecheng-7594	50	21	the	the	DET
fumecheng-7594	50	22	right	right	NOUN
fumecheng-7594	50	23	(	(	PUNCT
fumecheng-7594	50	24	see	see	VERB
fumecheng-7594	50	25	figs	fig	NOUN
fumecheng-7594	50	26	.	.	PUNCT
fumecheng-7594	51	1	1b	1b	NUM
fumecheng-7594	51	2	,	,	PUNCT
fumecheng-7594	51	3	c	c	NOUN
fumecheng-7594	51	4	)	)	PUNCT
fumecheng-7594	51	5	.	.	PUNCT
fumecheng-7594	52	1	in	in	ADP
fumecheng-7594	52	2	each	each	DET
fumecheng-7594	52	3	side	side	NOUN
fumecheng-7594	52	4	of	of	ADP
fumecheng-7594	52	5	the	the	DET
fumecheng-7594	52	6	runner	runner	NOUN
fumecheng-7594	52	7	,	,	PUNCT
fumecheng-7594	52	8	the	the	DET
fumecheng-7594	52	9	actuators	actuator	NOUN
fumecheng-7594	52	10	are	be	AUX
fumecheng-7594	52	11	aligned	align	VERB
fumecheng-7594	52	12	to	to	ADP
fumecheng-7594	52	13	each	each	DET
fumecheng-7594	52	14	other	other	ADJ
fumecheng-7594	52	15	with	with	ADP
fumecheng-7594	52	16	an	an	DET
fumecheng-7594	52	17	angle	angle	NOUN
fumecheng-7594	52	18	of	of	ADP
fumecheng-7594	52	19	90	90	NUM
fumecheng-7594	52	20	°	°	NOUN
fumecheng-7594	52	21	.	.	PUNCT
fumecheng-7594	53	1	with	with	ADP
fumecheng-7594	53	2	this	this	DET
fumecheng-7594	53	3	arrangement	arrangement	NOUN
fumecheng-7594	53	4	,	,	PUNCT
fumecheng-7594	53	5	the	the	DET
fumecheng-7594	53	6	runner	runner	NOUN
fumecheng-7594	53	7	can	can	AUX
fumecheng-7594	53	8	perform	perform	VERB
fumecheng-7594	53	9	horizontally	horizontally	ADV
fumecheng-7594	53	10	translational	translational	ADJ
fumecheng-7594	53	11	forward	forward	ADV
fumecheng-7594	53	12	and	and	CCONJ
fumecheng-7594	53	13	backward	backward	ADJ
fumecheng-7594	53	14	movements	movement	NOUN
fumecheng-7594	53	15	.	.	PUNCT
fumecheng-7594	54	1	the	the	DET
fumecheng-7594	54	2	actuator	actuator	NOUN
fumecheng-7594	54	3	holder	holder	NOUN
fumecheng-7594	54	4	on	on	ADP
fumecheng-7594	54	5	the	the	DET
fumecheng-7594	54	6	right	right	NOUN
fumecheng-7594	54	7	is	be	AUX
fumecheng-7594	54	8	fixed	fix	VERB
fumecheng-7594	54	9	to	to	ADP
fumecheng-7594	54	10	the	the	DET
fumecheng-7594	54	11	housing	housing	NOUN
fumecheng-7594	54	12	,	,	PUNCT
fumecheng-7594	54	13	while	while	SCONJ
fumecheng-7594	54	14	the	the	DET
fumecheng-7594	54	15	left	left	ADJ
fumecheng-7594	54	16	one	one	NOUN
fumecheng-7594	54	17	is	be	AUX
fumecheng-7594	54	18	movable	movable	ADJ
fumecheng-7594	54	19	and	and	CCONJ
fumecheng-7594	54	20	guided	guide	VERB
fumecheng-7594	54	21	by	by	ADP
fumecheng-7594	54	22	a	a	DET
fumecheng-7594	54	23	very	very	ADV
fumecheng-7594	54	24	low	low	ADJ
fumecheng-7594	54	25	-	-	PUNCT
fumecheng-7594	54	26	friction	friction	NOUN
fumecheng-7594	54	27	linear	linear	NOUN
fumecheng-7594	54	28	ball	ball	NOUN
fumecheng-7594	54	29	bearing	bearing	NOUN
fumecheng-7594	54	30	.	.	PUNCT
fumecheng-7594	55	1	preloads	preload	NOUN
fumecheng-7594	55	2	applied	apply	VERB
fumecheng-7594	55	3	to	to	ADP
fumecheng-7594	55	4	the	the	DET
fumecheng-7594	55	5	drive	drive	NOUN
fumecheng-7594	55	6	are	be	AUX
fumecheng-7594	55	7	generated	generate	VERB
fumecheng-7594	55	8	and	and	CCONJ
fumecheng-7594	55	9	regulated	regulate	VERB
fumecheng-7594	55	10	by	by	ADP
fumecheng-7594	55	11	a	a	DET
fumecheng-7594	55	12	springsystem	springsystem	NOUN
fumecheng-7594	55	13	acting	act	VERB
fumecheng-7594	55	14	on	on	ADP
fumecheng-7594	55	15	the	the	DET
fumecheng-7594	55	16	left	left	ADJ
fumecheng-7594	55	17	actuator	actuator	NOUN
fumecheng-7594	55	18	holder	holder	NOUN
fumecheng-7594	55	19	.	.	PUNCT
fumecheng-7594	56	1	the	the	DET
fumecheng-7594	56	2	value	value	NOUN
fumecheng-7594	56	3	of	of	ADP
fumecheng-7594	56	4	preloads	preload	NOUN
fumecheng-7594	56	5	is	be	AUX
fumecheng-7594	56	6	measured	measure	VERB
fumecheng-7594	56	7	by	by	ADP
fumecheng-7594	56	8	a	a	DET
fumecheng-7594	56	9	force	force	NOUN
fumecheng-7594	56	10	sensor	sensor	NOUN
fumecheng-7594	56	11	(	(	PUNCT
fumecheng-7594	56	12	m17	m17	VERB
fumecheng-7594	56	13	by	by	ADP
fumecheng-7594	56	14	ati	ati	NOUN
fumecheng-7594	56	15	industrial	industrial	ADJ
fumecheng-7594	56	16	automation	automation	NOUN
fumecheng-7594	56	17	,	,	PUNCT
fumecheng-7594	56	18	pinnacle	pinnacle	PROPN
fumecheng-7594	56	19	park	park	PROPN
fumecheng-7594	56	20	apex	apex	PROPN
fumecheng-7594	56	21	,	,	PUNCT
fumecheng-7594	56	22	nc	nc	PROPN
fumecheng-7594	56	23	,	,	PUNCT
fumecheng-7594	56	24	usa	usa	PROPN
fumecheng-7594	56	25	)	)	PUNCT
fumecheng-7594	56	26	.	.	PUNCT
fumecheng-7594	57	1	the	the	DET
fumecheng-7594	57	2	position	position	NOUN
fumecheng-7594	57	3	of	of	ADP
fumecheng-7594	57	4	the	the	DET
fumecheng-7594	57	5	runner	runner	NOUN
fumecheng-7594	57	6	is	be	AUX
fumecheng-7594	57	7	measured	measure	VERB
fumecheng-7594	57	8	via	via	ADP
fumecheng-7594	57	9	a	a	DET
fumecheng-7594	57	10	high	high	ADJ
fumecheng-7594	57	11	-	-	PUNCT
fumecheng-7594	57	12	resolution	resolution	NOUN
fumecheng-7594	57	13	laser	laser	NOUN
fumecheng-7594	57	14	interferometer	interferometer	NOUN
fumecheng-7594	57	15	(	(	PUNCT
fumecheng-7594	57	16	sp-120	sp-120	ADJ
fumecheng-7594	57	17	by	by	ADP
fumecheng-7594	57	18	sios	sio	NOUN
fumecheng-7594	57	19	meßtechnik	meßtechnik	PROPN
fumecheng-7594	57	20	gmbh	gmbh	PROPN
fumecheng-7594	57	21	,	,	PUNCT
fumecheng-7594	57	22	ilmenau	ilmenau	PROPN
fumecheng-7594	57	23	,	,	PUNCT
fumecheng-7594	57	24	germany	germany	PROPN
fumecheng-7594	57	25	)	)	PUNCT
fumecheng-7594	57	26	.	.	PUNCT
fumecheng-7594	58	1	in	in	ADP
fumecheng-7594	58	2	the	the	DET
fumecheng-7594	58	3	runner	runner	NOUN
fumecheng-7594	58	4	's	's	PART
fumecheng-7594	58	5	movement	movement	NOUN
fumecheng-7594	58	6	direction	direction	NOUN
fumecheng-7594	58	7	,	,	PUNCT
fumecheng-7594	58	8	a	a	DET
fumecheng-7594	58	9	miniature	miniature	ADJ
fumecheng-7594	58	10	load	load	NOUN
fumecheng-7594	58	11	cell	cell	NOUN
fumecheng-7594	58	12	(	(	PUNCT
fumecheng-7594	58	13	m31	m31	NOUN
fumecheng-7594	58	14	by	by	ADP
fumecheng-7594	58	15	sensing	sense	VERB
fumecheng-7594	58	16	and	and	CCONJ
fumecheng-7594	58	17	control	control	NOUN
fumecheng-7594	58	18	automation	automation	NOUN
fumecheng-7594	58	19	and	and	CCONJ
fumecheng-7594	58	20	control	control	NOUN
fumecheng-7594	58	21	solutions	solution	NOUN
fumecheng-7594	58	22	honeywell	honeywell	PROPN
fumecheng-7594	58	23	,	,	PUNCT
fumecheng-7594	58	24	golden	golden	ADJ
fumecheng-7594	58	25	valley	valley	NOUN
fumecheng-7594	58	26	,	,	PUNCT
fumecheng-7594	58	27	mn	mn	PROPN
fumecheng-7594	58	28	,	,	PUNCT
fumecheng-7594	58	29	usa	usa	PROPN
fumecheng-7594	58	30	)	)	PUNCT
fumecheng-7594	58	31	is	be	AUX
fumecheng-7594	58	32	set	set	VERB
fumecheng-7594	58	33	up	up	ADP
fumecheng-7594	58	34	in	in	ADP
fumecheng-7594	58	35	front	front	NOUN
fumecheng-7594	58	36	of	of	ADP
fumecheng-7594	58	37	the	the	DET
fumecheng-7594	58	38	runner	runner	NOUN
fumecheng-7594	58	39	to	to	PART
fumecheng-7594	58	40	measure	measure	VERB
fumecheng-7594	58	41	forces	force	NOUN
fumecheng-7594	58	42	generated	generate	VERB
fumecheng-7594	58	43	by	by	ADP
fumecheng-7594	58	44	the	the	DET
fumecheng-7594	58	45	drive	drive	NOUN
fumecheng-7594	58	46	.	.	PUNCT
fumecheng-7594	59	1	when	when	SCONJ
fumecheng-7594	59	2	the	the	DET
fumecheng-7594	59	3	runner	runner	NOUN
fumecheng-7594	59	4	touches	touch	VERB
fumecheng-7594	59	5	the	the	DET
fumecheng-7594	59	6	load	load	NOUN
fumecheng-7594	59	7	cell	cell	NOUN
fumecheng-7594	59	8	,	,	PUNCT
fumecheng-7594	59	9	the	the	DET
fumecheng-7594	59	10	force	force	NOUN
fumecheng-7594	59	11	is	be	AUX
fumecheng-7594	59	12	measured	measure	VERB
fumecheng-7594	59	13	and	and	CCONJ
fumecheng-7594	59	14	recorded	record	VERB
fumecheng-7594	59	15	.	.	PUNCT
fumecheng-7594	60	1	the	the	DET
fumecheng-7594	60	2	piezo	piezo	PROPN
fumecheng-7594	60	3	elements	element	NOUN
fumecheng-7594	60	4	are	be	AUX
fumecheng-7594	60	5	supplied	supply	VERB
fumecheng-7594	60	6	by	by	ADP
fumecheng-7594	60	7	saw	saw	NOUN
fumecheng-7594	60	8	-	-	PUNCT
fumecheng-7594	60	9	tooth	tooth	NOUN
fumecheng-7594	60	10	like	like	ADP
fumecheng-7594	60	11	driving	drive	VERB
fumecheng-7594	60	12	voltages	voltage	NOUN
fumecheng-7594	60	13	whose	whose	DET
fumecheng-7594	60	14	amplitude	amplitude	NOUN
fumecheng-7594	60	15	,	,	PUNCT
fumecheng-7594	60	16	slew	slew	ADJ
fumecheng-7594	60	17	-	-	PUNCT
fumecheng-7594	60	18	rate	rate	NOUN
fumecheng-7594	60	19	and	and	CCONJ
fumecheng-7594	60	20	frequency	frequency	NOUN
fumecheng-7594	60	21	can	can	AUX
fumecheng-7594	60	22	be	be	AUX
fumecheng-7594	60	23	varied	varied	ADJ
fumecheng-7594	60	24	via	via	ADP
fumecheng-7594	60	25	driving	drive	VERB
fumecheng-7594	60	26	electronics	electronic	NOUN
fumecheng-7594	60	27	.	.	PUNCT
fumecheng-7594	61	1	when	when	SCONJ
fumecheng-7594	61	2	six	six	NUM
fumecheng-7594	61	3	synchronous	synchronous	ADJ
fumecheng-7594	61	4	sawtooth	sawtooth	NOUN
fumecheng-7594	61	5	like	like	ADP
fumecheng-7594	61	6	driving	drive	VERB
fumecheng-7594	61	7	voltages	voltage	NOUN
fumecheng-7594	61	8	are	be	AUX
fumecheng-7594	61	9	applied	apply	VERB
fumecheng-7594	61	10	to	to	ADP
fumecheng-7594	61	11	the	the	DET
fumecheng-7594	61	12	piezo	piezo	PROPN
fumecheng-7594	61	13	elements	element	NOUN
fumecheng-7594	61	14	,	,	PUNCT
fumecheng-7594	61	15	the	the	DET
fumecheng-7594	61	16	six	six	NUM
fumecheng-7594	61	17	hemispheres	hemisphere	NOUN
fumecheng-7594	61	18	also	also	ADV
fumecheng-7594	61	19	performed	perform	VERB
fumecheng-7594	61	20	synchronous	synchronous	ADJ
fumecheng-7594	61	21	saw	saw	NOUN
fumecheng-7594	61	22	-	-	PUNCT
fumecheng-7594	61	23	tooth	tooth	NOUN
fumecheng-7594	61	24	like	like	ADP
fumecheng-7594	61	25	displacements	displacement	NOUN
fumecheng-7594	61	26	,	,	PUNCT
fumecheng-7594	61	27	leading	lead	VERB
fumecheng-7594	61	28	to	to	ADP
fumecheng-7594	61	29	stick	stick	NOUN
fumecheng-7594	61	30	-	-	PUNCT
fumecheng-7594	61	31	slip	slip	NOUN
fumecheng-7594	61	32	motions	motion	NOUN
fumecheng-7594	61	33	for	for	ADP
fumecheng-7594	61	34	the	the	DET
fumecheng-7594	61	35	112	112	NUM
fumecheng-7594	61	36	h.	h.	PROPN
fumecheng-7594	61	37	x.	x.	NOUN
fumecheng-7594	61	38	nguyen	nguyen	PROPN
fumecheng-7594	61	39	,	,	PUNCT
fumecheng-7594	61	40	a.	a.	PROPN
fumecheng-7594	61	41	h.	h.	PROPN
fumecheng-7594	61	42	nguyen	nguyen	PROPN
fumecheng-7594	61	43	runner	runner	PROPN
fumecheng-7594	61	44	.	.	PUNCT
fumecheng-7594	62	1	the	the	DET
fumecheng-7594	62	2	displacement	displacement	ADJ
fumecheng-7594	62	3	amplitude	amplitude	NOUN
fumecheng-7594	62	4	of	of	ADP
fumecheng-7594	62	5	the	the	DET
fumecheng-7594	62	6	contact	contact	NOUN
fumecheng-7594	62	7	center	center	NOUN
fumecheng-7594	62	8	of	of	ADP
fumecheng-7594	62	9	each	each	DET
fumecheng-7594	62	10	ruby	ruby	NOUN
fumecheng-7594	62	11	hemispheres	hemisphere	NOUN
fumecheng-7594	62	12	/	/	SYM
fumecheng-7594	62	13	actuator	actuator	NOUN
fumecheng-7594	62	14	is	be	AUX
fumecheng-7594	62	15	denoted	denote	VERB
fumecheng-7594	62	16	as	as	ADP
fumecheng-7594	62	17	the	the	DET
fumecheng-7594	62	18	actuation	actuation	NOUN
fumecheng-7594	62	19	amplitude	amplitude	NOUN
fumecheng-7594	62	20	.	.	PUNCT
fumecheng-7594	63	1	this	this	DET
fumecheng-7594	63	2	amplitude	amplitude	NOUN
fumecheng-7594	63	3	depends	depend	VERB
fumecheng-7594	63	4	on	on	ADP
fumecheng-7594	63	5	the	the	DET
fumecheng-7594	63	6	radius	radius	NOUN
fumecheng-7594	63	7	of	of	ADP
fumecheng-7594	63	8	the	the	DET
fumecheng-7594	63	9	hemispheres	hemisphere	NOUN
fumecheng-7594	63	10	,	,	PUNCT
fumecheng-7594	63	11	the	the	DET
fumecheng-7594	63	12	dimension	dimension	NOUN
fumecheng-7594	63	13	and	and	CCONJ
fumecheng-7594	63	14	the	the	DET
fumecheng-7594	63	15	structure	structure	NOUN
fumecheng-7594	63	16	of	of	ADP
fumecheng-7594	63	17	the	the	DET
fumecheng-7594	63	18	piezo	piezo	PROPN
fumecheng-7594	63	19	,	,	PUNCT
fumecheng-7594	63	20	as	as	ADV
fumecheng-7594	63	21	well	well	ADV
fumecheng-7594	63	22	as	as	ADP
fumecheng-7594	63	23	the	the	DET
fumecheng-7594	63	24	amplitude	amplitude	NOUN
fumecheng-7594	63	25	of	of	ADP
fumecheng-7594	63	26	driving	drive	VERB
fumecheng-7594	63	27	voltages	voltage	NOUN
fumecheng-7594	63	28	.	.	PUNCT
fumecheng-7594	64	1	the	the	DET
fumecheng-7594	64	2	radius	radius	NOUN
fumecheng-7594	64	3	of	of	ADP
fumecheng-7594	64	4	hemispheres	hemisphere	NOUN
fumecheng-7594	64	5	,	,	PUNCT
fumecheng-7594	64	6	the	the	DET
fumecheng-7594	64	7	driving	drive	VERB
fumecheng-7594	64	8	frequency	frequency	NOUN
fumecheng-7594	64	9	,	,	PUNCT
fumecheng-7594	64	10	the	the	DET
fumecheng-7594	64	11	amplitude	amplitude	NOUN
fumecheng-7594	64	12	of	of	ADP
fumecheng-7594	64	13	driving	drive	VERB
fumecheng-7594	64	14	voltages	voltage	NOUN
fumecheng-7594	64	15	and	and	CCONJ
fumecheng-7594	64	16	the	the	DET
fumecheng-7594	64	17	preload	preload	NOUN
fumecheng-7594	64	18	are	be	AUX
fumecheng-7594	64	19	varied	varied	ADJ
fumecheng-7594	64	20	to	to	PART
fumecheng-7594	64	21	characterize	characterize	VERB
fumecheng-7594	64	22	the	the	DET
fumecheng-7594	64	23	drive	drive	NOUN
fumecheng-7594	64	24	’s	’s	PART
fumecheng-7594	64	25	behavior	behavior	NOUN
fumecheng-7594	64	26	.	.	PUNCT
fumecheng-7594	65	1	in	in	ADP
fumecheng-7594	65	2	this	this	DET
fumecheng-7594	65	3	work	work	NOUN
fumecheng-7594	65	4	,	,	PUNCT
fumecheng-7594	65	5	the	the	DET
fumecheng-7594	65	6	radii	radius	NOUN
fumecheng-7594	65	7	of	of	ADP
fumecheng-7594	65	8	the	the	DET
fumecheng-7594	65	9	ruby	ruby	PROPN
fumecheng-7594	65	10	hemispheres	hemisphere	NOUN
fumecheng-7594	65	11	of	of	ADP
fumecheng-7594	65	12	0.25𝑚𝑚	0.25𝑚𝑚	NOUN
fumecheng-7594	65	13	,	,	PUNCT
fumecheng-7594	65	14	0.5𝑚𝑚	0.5𝑚𝑚	NUM
fumecheng-7594	65	15	and	and	CCONJ
fumecheng-7594	65	16	1𝑚𝑚	1𝑚𝑚	NOUN
fumecheng-7594	65	17	are	be	AUX
fumecheng-7594	65	18	considered	consider	VERB
fumecheng-7594	65	19	.	.	PUNCT
fumecheng-7594	66	1	fig	fig	NOUN
fumecheng-7594	66	2	.	.	PUNCT
fumecheng-7594	67	1	1	1	NUM
fumecheng-7594	67	2	setup	setup	NOUN
fumecheng-7594	67	3	of	of	ADP
fumecheng-7594	67	4	the	the	DET
fumecheng-7594	67	5	experimental	experimental	ADJ
fumecheng-7594	67	6	platform	platform	NOUN
fumecheng-7594	67	7	:	:	PUNCT
fumecheng-7594	67	8	(	(	PUNCT
fumecheng-7594	67	9	a	a	X
fumecheng-7594	67	10	)	)	PUNCT
fumecheng-7594	67	11	photo	photo	NOUN
fumecheng-7594	67	12	of	of	ADP
fumecheng-7594	67	13	the	the	DET
fumecheng-7594	67	14	test	test	NOUN
fumecheng-7594	67	15	stand	stand	NOUN
fumecheng-7594	67	16	;	;	PUNCT
fumecheng-7594	67	17	(	(	PUNCT
fumecheng-7594	67	18	b	b	X
fumecheng-7594	67	19	)	)	PUNCT
fumecheng-7594	67	20	photo	photo	NOUN
fumecheng-7594	67	21	of	of	ADP
fumecheng-7594	67	22	the	the	DET
fumecheng-7594	67	23	piezo	piezo	X
fumecheng-7594	67	24	actuators	actuator	NOUN
fumecheng-7594	67	25	;	;	PUNCT
fumecheng-7594	67	26	(	(	PUNCT
fumecheng-7594	67	27	c	c	X
fumecheng-7594	67	28	)	)	PUNCT
fumecheng-7594	67	29	cad	cad	NOUN
fumecheng-7594	67	30	-	-	PUNCT
fumecheng-7594	67	31	based	base	VERB
fumecheng-7594	67	32	schematic	schematic	ADJ
fumecheng-7594	67	33	front	front	ADJ
fumecheng-7594	67	34	-	-	PUNCT
fumecheng-7594	67	35	view	view	NOUN
fumecheng-7594	67	36	[	[	X
fumecheng-7594	67	37	16,10	16,10	X
fumecheng-7594	67	38	]	]	X
fumecheng-7594	67	39	2.2	2.2	NUM
fumecheng-7594	67	40	.	.	PUNCT
fumecheng-7594	67	41	fabrication	fabrication	NOUN
fumecheng-7594	67	42	and	and	CCONJ
fumecheng-7594	67	43	assembly	assembly	NOUN
fumecheng-7594	67	44	tolerance	tolerance	NOUN
fumecheng-7594	67	45	the	the	DET
fumecheng-7594	67	46	investigated	investigate	VERB
fumecheng-7594	67	47	drive	drive	NOUN
fumecheng-7594	67	48	was	be	AUX
fumecheng-7594	67	49	fabricated	fabricate	VERB
fumecheng-7594	67	50	and	and	CCONJ
fumecheng-7594	67	51	assembled	assemble	VERB
fumecheng-7594	67	52	manually	manually	ADV
fumecheng-7594	67	53	,	,	PUNCT
fumecheng-7594	67	54	which	which	PRON
fumecheng-7594	67	55	could	could	AUX
fumecheng-7594	67	56	make	make	VERB
fumecheng-7594	67	57	the	the	DET
fumecheng-7594	67	58	tolerance	tolerance	NOUN
fumecheng-7594	67	59	of	of	ADP
fumecheng-7594	67	60	the	the	DET
fumecheng-7594	67	61	fabrication	fabrication	NOUN
fumecheng-7594	67	62	and	and	CCONJ
fumecheng-7594	67	63	the	the	DET
fumecheng-7594	67	64	assembly	assembly	NOUN
fumecheng-7594	67	65	of	of	ADP
fumecheng-7594	67	66	micro	micro	NOUN
fumecheng-7594	67	67	-	-	NOUN
fumecheng-7594	67	68	parts	part	NOUN
fumecheng-7594	67	69	vary	vary	VERB
fumecheng-7594	67	70	in	in	ADP
fumecheng-7594	67	71	an	an	DET
fumecheng-7594	67	72	uncontrollable	uncontrollable	ADJ
fumecheng-7594	67	73	manner	manner	NOUN
fumecheng-7594	67	74	.	.	PUNCT
fumecheng-7594	68	1	the	the	DET
fumecheng-7594	68	2	structure	structure	NOUN
fumecheng-7594	68	3	of	of	ADP
fumecheng-7594	68	4	the	the	DET
fumecheng-7594	68	5	piezo	piezo	X
fumecheng-7594	68	6	elements	element	NOUN
fumecheng-7594	68	7	and	and	CCONJ
fumecheng-7594	68	8	the	the	DET
fumecheng-7594	68	9	assembly	assembly	NOUN
fumecheng-7594	68	10	of	of	ADP
fumecheng-7594	68	11	the	the	DET
fumecheng-7594	68	12	actuators	actuator	NOUN
fumecheng-7594	68	13	are	be	AUX
fumecheng-7594	68	14	schematically	schematically	NOUN
fumecheng-7594	68	15	shown	show	VERB
fumecheng-7594	68	16	in	in	ADP
fumecheng-7594	68	17	fig	fig	NOUN
fumecheng-7594	68	18	.	.	PUNCT
fumecheng-7594	69	1	2	2	X
fumecheng-7594	69	2	.	.	X
fumecheng-7594	69	3	the	the	DET
fumecheng-7594	69	4	piezo	piezo	PROPN
fumecheng-7594	69	5	elements	element	NOUN
fumecheng-7594	69	6	are	be	AUX
fumecheng-7594	69	7	fabricated	fabricate	VERB
fumecheng-7594	69	8	out	out	ADP
fumecheng-7594	69	9	of	of	ADP
fumecheng-7594	69	10	a	a	DET
fumecheng-7594	69	11	piezoceramic	piezoceramic	ADJ
fumecheng-7594	69	12	bulk	bulk	NOUN
fumecheng-7594	69	13	(	(	PUNCT
fumecheng-7594	69	14	pic151	pic151	NOUN
fumecheng-7594	69	15	)	)	PUNCT
fumecheng-7594	69	16	via	via	ADP
fumecheng-7594	69	17	the	the	DET
fumecheng-7594	69	18	laser	laser	NOUN
fumecheng-7594	69	19	-	-	PUNCT
fumecheng-7594	69	20	based	base	VERB
fumecheng-7594	69	21	micro	micro	NOUN
fumecheng-7594	69	22	-	-	NOUN
fumecheng-7594	69	23	machining	machining	NOUN
fumecheng-7594	69	24	.	.	PUNCT
fumecheng-7594	70	1	there	there	PRON
fumecheng-7594	70	2	are	be	VERB
fumecheng-7594	70	3	two	two	NUM
fumecheng-7594	70	4	types	type	NOUN
fumecheng-7594	70	5	of	of	ADP
fumecheng-7594	70	6	the	the	DET
fumecheng-7594	70	7	structured	structure	VERB
fumecheng-7594	70	8	piezo	piezo	X
fumecheng-7594	70	9	.	.	PUNCT
fumecheng-7594	71	1	the	the	DET
fumecheng-7594	71	2	so	so	ADV
fumecheng-7594	71	3	-	-	PUNCT
fumecheng-7594	71	4	called	call	VERB
fumecheng-7594	71	5	“	"	PUNCT
fumecheng-7594	71	6	a	a	DET
fumecheng-7594	71	7	-	-	PUNCT
fumecheng-7594	71	8	type	type	NOUN
fumecheng-7594	71	9	”	"	PUNCT
fumecheng-7594	71	10	has	have	VERB
fumecheng-7594	71	11	two	two	NUM
fumecheng-7594	71	12	segment	segment	NOUN
fumecheng-7594	71	13	zones	zone	NOUN
fumecheng-7594	71	14	where	where	SCONJ
fumecheng-7594	71	15	two	two	NUM
fumecheng-7594	71	16	ruby	ruby	NOUN
fumecheng-7594	71	17	hemispheres	hemisphere	NOUN
fumecheng-7594	71	18	are	be	AUX
fumecheng-7594	71	19	glued	glue	VERB
fumecheng-7594	71	20	on	on	ADP
fumecheng-7594	71	21	.	.	PUNCT
fumecheng-7594	72	1	the	the	DET
fumecheng-7594	72	2	“	"	PUNCT
fumecheng-7594	72	3	b	b	X
fumecheng-7594	72	4	-	-	PUNCT
fumecheng-7594	72	5	type	type	NOUN
fumecheng-7594	72	6	”	"	PUNCT
fumecheng-7594	72	7	has	have	VERB
fumecheng-7594	72	8	only	only	ADV
fumecheng-7594	72	9	one	one	NUM
fumecheng-7594	72	10	segment	segment	NOUN
fumecheng-7594	72	11	zone	zone	NOUN
fumecheng-7594	72	12	with	with	ADP
fumecheng-7594	72	13	one	one	NUM
fumecheng-7594	72	14	glued	glue	VERB
fumecheng-7594	72	15	hemisphere	hemisphere	ADV
fumecheng-7594	72	16	(	(	PUNCT
fumecheng-7594	72	17	see	see	VERB
fumecheng-7594	72	18	also	also	ADV
fumecheng-7594	72	19	fig	fig	NOUN
fumecheng-7594	72	20	.	.	PUNCT
fumecheng-7594	73	1	1b	1b	NUM
fumecheng-7594	73	2	)	)	PUNCT
fumecheng-7594	73	3	.	.	PUNCT
fumecheng-7594	74	1	each	each	DET
fumecheng-7594	74	2	block	block	NOUN
fumecheng-7594	74	3	of	of	ADP
fumecheng-7594	74	4	the	the	DET
fumecheng-7594	74	5	piezo	piezo	X
fumecheng-7594	74	6	element	element	NOUN
fumecheng-7594	74	7	and	and	CCONJ
fumecheng-7594	74	8	the	the	DET
fumecheng-7594	74	9	ruby	ruby	PROPN
fumecheng-7594	74	10	hemispheres	hemisphere	NOUN
fumecheng-7594	74	11	are	be	AUX
fumecheng-7594	74	12	then	then	ADV
fumecheng-7594	74	13	glued	glue	VERB
fumecheng-7594	74	14	to	to	ADP
fumecheng-7594	74	15	the	the	DET
fumecheng-7594	74	16	actuator	actuator	NOUN
fumecheng-7594	74	17	holders	holder	NOUN
fumecheng-7594	74	18	.	.	PUNCT
fumecheng-7594	75	1	for	for	ADP
fumecheng-7594	75	2	each	each	DET
fumecheng-7594	75	3	actuator	actuator	NOUN
fumecheng-7594	75	4	holder	holder	NOUN
fumecheng-7594	75	5	,	,	PUNCT
fumecheng-7594	75	6	the	the	DET
fumecheng-7594	75	7	two	two	NUM
fumecheng-7594	75	8	blocks	block	NOUN
fumecheng-7594	75	9	must	must	AUX
fumecheng-7594	75	10	align	align	VERB
fumecheng-7594	75	11	together	together	ADV
fumecheng-7594	75	12	with	with	ADP
fumecheng-7594	75	13	an	an	DET
fumecheng-7594	75	14	angle	angle	NOUN
fumecheng-7594	75	15	of	of	ADP
fumecheng-7594	75	16	90	90	NUM
fumecheng-7594	75	17	°	°	NOUN
fumecheng-7594	75	18	.	.	PUNCT
fumecheng-7594	76	1	to	to	ADP
fumecheng-7594	76	2	our	our	PRON
fumecheng-7594	76	3	practical	practical	ADJ
fumecheng-7594	76	4	experiences	experience	NOUN
fumecheng-7594	76	5	,	,	PUNCT
fumecheng-7594	76	6	the	the	DET
fumecheng-7594	76	7	fabrication	fabrication	NOUN
fumecheng-7594	76	8	and	and	CCONJ
fumecheng-7594	76	9	the	the	DET
fumecheng-7594	76	10	manual	manual	ADJ
fumecheng-7594	76	11	assembly	assembly	NOUN
fumecheng-7594	76	12	of	of	ADP
fumecheng-7594	76	13	such	such	ADJ
fumecheng-7594	76	14	micro	micro	NOUN
fumecheng-7594	76	15	-	-	NOUN
fumecheng-7594	76	16	parts	part	NOUN
fumecheng-7594	76	17	are	be	AUX
fumecheng-7594	76	18	complicated	complicated	ADJ
fumecheng-7594	76	19	and	and	CCONJ
fumecheng-7594	76	20	thus	thus	ADV
fumecheng-7594	76	21	,	,	PUNCT
fumecheng-7594	76	22	the	the	DET
fumecheng-7594	76	23	tolerance	tolerance	NOUN
fumecheng-7594	76	24	can	can	AUX
fumecheng-7594	76	25	vary	vary	VERB
fumecheng-7594	76	26	in	in	ADP
fumecheng-7594	76	27	a	a	DET
fumecheng-7594	76	28	large	large	ADJ
fumecheng-7594	76	29	range	range	NOUN
fumecheng-7594	76	30	.	.	PUNCT
fumecheng-7594	77	1	this	this	PRON
fumecheng-7594	77	2	makes	make	VERB
fumecheng-7594	77	3	the	the	DET
fumecheng-7594	77	4	operational	operational	ADJ
fumecheng-7594	77	5	characteristics	characteristic	NOUN
fumecheng-7594	77	6	of	of	ADP
fumecheng-7594	77	7	the	the	DET
fumecheng-7594	77	8	drive	drive	ADJ
fumecheng-7594	77	9	case	case	NOUN
fumecheng-7594	77	10	-	-	PUNCT
fumecheng-7594	77	11	by	by	ADP
fumecheng-7594	77	12	-	-	PUNCT
fumecheng-7594	77	13	case	case	NOUN
fumecheng-7594	77	14	very	very	ADV
fumecheng-7594	77	15	different	different	ADJ
fumecheng-7594	77	16	.	.	PUNCT
fumecheng-7594	78	1	error	error	NOUN
fumecheng-7594	78	2	resources	resource	NOUN
fumecheng-7594	78	3	determining	determine	VERB
fumecheng-7594	78	4	the	the	DET
fumecheng-7594	78	5	tolerance	tolerance	NOUN
fumecheng-7594	78	6	of	of	ADP
fumecheng-7594	78	7	the	the	DET
fumecheng-7594	78	8	investigated	investigate	VERB
fumecheng-7594	78	9	drive	drive	NOUN
fumecheng-7594	78	10	are	be	AUX
fumecheng-7594	78	11	caused	cause	VERB
fumecheng-7594	78	12	by	by	ADP
fumecheng-7594	78	13	both	both	CCONJ
fumecheng-7594	78	14	the	the	DET
fumecheng-7594	78	15	fabrication	fabrication	NOUN
fumecheng-7594	78	16	and	and	CCONJ
fumecheng-7594	78	17	the	the	DET
fumecheng-7594	78	18	assembly	assembly	NOUN
fumecheng-7594	78	19	as	as	SCONJ
fumecheng-7594	78	20	follows	follow	VERB
fumecheng-7594	78	21	:	:	PUNCT
fumecheng-7594	78	22	▪	▪	NOUN
fumecheng-7594	78	23	for	for	ADP
fumecheng-7594	78	24	the	the	DET
fumecheng-7594	78	25	fabrication	fabrication	NOUN
fumecheng-7594	78	26	:	:	PUNCT
fumecheng-7594	78	27	the	the	DET
fumecheng-7594	78	28	laser	laser	NOUN
fumecheng-7594	78	29	-	-	PUNCT
fumecheng-7594	78	30	based	base	VERB
fumecheng-7594	78	31	micro	micro	NOUN
fumecheng-7594	78	32	-	-	ADJ
fumecheng-7594	78	33	machining	machining	ADJ
fumecheng-7594	78	34	method	method	NOUN
fumecheng-7594	78	35	can	can	AUX
fumecheng-7594	78	36	not	not	PART
fumecheng-7594	78	37	ensure	ensure	VERB
fumecheng-7594	78	38	the	the	DET
fumecheng-7594	78	39	depth	depth	NOUN
fumecheng-7594	78	40	of	of	ADP
fumecheng-7594	78	41	the	the	DET
fumecheng-7594	78	42	groove	groove	NOUN
fumecheng-7594	78	43	of	of	ADP
fumecheng-7594	78	44	the	the	DET
fumecheng-7594	78	45	piezo	piezo	X
fumecheng-7594	78	46	elements	element	NOUN
fumecheng-7594	78	47	equal	equal	ADJ
fumecheng-7594	78	48	.	.	PUNCT
fumecheng-7594	79	1	this	this	PRON
fumecheng-7594	79	2	makes	make	VERB
fumecheng-7594	79	3	the	the	DET
fumecheng-7594	79	4	dynamic	dynamic	ADJ
fumecheng-7594	79	5	behavior	behavior	NOUN
fumecheng-7594	79	6	(	(	PUNCT
fumecheng-7594	79	7	stiffness	stiffness	NOUN
fumecheng-7594	79	8	and	and	CCONJ
fumecheng-7594	79	9	damping	damp	VERB
fumecheng-7594	79	10	coefficients	coefficient	NOUN
fumecheng-7594	79	11	)	)	PUNCT
fumecheng-7594	79	12	of	of	ADP
fumecheng-7594	79	13	an	an	DET
fumecheng-7594	79	14	individual	individual	ADJ
fumecheng-7594	79	15	actuator	actuator	NOUN
fumecheng-7594	79	16	different	different	ADV
fumecheng-7594	79	17	from	from	ADP
fumecheng-7594	79	18	others	other	NOUN
fumecheng-7594	79	19	.	.	PUNCT
fumecheng-7594	80	1	also	also	ADV
fumecheng-7594	80	2	,	,	PUNCT
fumecheng-7594	80	3	the	the	DET
fumecheng-7594	80	4	discrepancy	discrepancy	NOUN
fumecheng-7594	80	5	of	of	ADP
fumecheng-7594	80	6	the	the	DET
fumecheng-7594	80	7	displacement	displacement	ADJ
fumecheng-7594	80	8	amplitude	amplitude	NOUN
fumecheng-7594	80	9	of	of	ADP
fumecheng-7594	80	10	the	the	DET
fumecheng-7594	80	11	actuators	actuator	NOUN
fumecheng-7594	80	12	appears	appear	VERB
fumecheng-7594	80	13	.	.	PUNCT
fumecheng-7594	81	1	the	the	DET
fumecheng-7594	81	2	fabrication	fabrication	NOUN
fumecheng-7594	81	3	of	of	ADP
fumecheng-7594	81	4	the	the	DET
fumecheng-7594	81	5	runner	runner	NOUN
fumecheng-7594	81	6	also	also	ADV
fumecheng-7594	81	7	has	have	VERB
fumecheng-7594	81	8	variation	variation	NOUN
fumecheng-7594	81	9	.	.	PUNCT
fumecheng-7594	82	1	investigation	investigation	NOUN
fumecheng-7594	82	2	of	of	ADP
fumecheng-7594	82	3	influences	influence	NOUN
fumecheng-7594	82	4	of	of	ADP
fumecheng-7594	82	5	fabrication	fabrication	NOUN
fumecheng-7594	82	6	tolerances	tolerance	NOUN
fumecheng-7594	82	7	on	on	ADP
fumecheng-7594	82	8	operational	operational	ADJ
fumecheng-7594	82	9	characteristics	characteristic	NOUN
fumecheng-7594	82	10	of	of	ADP
fumecheng-7594	82	11	piezo	piezo	NOUN
fumecheng-7594	82	12	-	-	ADJ
fumecheng-7594	82	13	actuated	actuated	ADJ
fumecheng-7594	82	14	...	...	PUNCT
fumecheng-7594	82	15	113	113	NUM
fumecheng-7594	82	16	▪	▪	NOUN
fumecheng-7594	82	17	for	for	ADP
fumecheng-7594	82	18	the	the	DET
fumecheng-7594	82	19	assembly	assembly	NOUN
fumecheng-7594	82	20	:	:	PUNCT
fumecheng-7594	82	21	i	i	NOUN
fumecheng-7594	82	22	)	)	PUNCT
fumecheng-7594	82	23	in	in	ADP
fumecheng-7594	82	24	fact	fact	NOUN
fumecheng-7594	82	25	,	,	PUNCT
fumecheng-7594	82	26	the	the	DET
fumecheng-7594	82	27	ruby	ruby	PROPN
fumecheng-7594	82	28	hemispheres	hemisphere	NOUN
fumecheng-7594	82	29	are	be	AUX
fumecheng-7594	82	30	manually	manually	ADV
fumecheng-7594	82	31	attached	attach	VERB
fumecheng-7594	82	32	to	to	ADP
fumecheng-7594	82	33	the	the	DET
fumecheng-7594	82	34	piezo	piezo	PROPN
fumecheng-7594	82	35	elements	element	NOUN
fumecheng-7594	82	36	using	use	VERB
fumecheng-7594	82	37	a	a	DET
fumecheng-7594	82	38	glued	glue	VERB
fumecheng-7594	82	39	layer	layer	NOUN
fumecheng-7594	82	40	under	under	ADP
fumecheng-7594	82	41	the	the	DET
fumecheng-7594	82	42	support	support	NOUN
fumecheng-7594	82	43	of	of	ADP
fumecheng-7594	82	44	a	a	DET
fumecheng-7594	82	45	light	light	ADJ
fumecheng-7594	82	46	microscope	microscope	NOUN
fumecheng-7594	82	47	.	.	PUNCT
fumecheng-7594	83	1	the	the	DET
fumecheng-7594	83	2	thickness	thickness	NOUN
fumecheng-7594	83	3	and	and	CCONJ
fumecheng-7594	83	4	the	the	DET
fumecheng-7594	83	5	configuration	configuration	NOUN
fumecheng-7594	83	6	of	of	ADP
fumecheng-7594	83	7	the	the	DET
fumecheng-7594	83	8	glue	glue	NOUN
fumecheng-7594	83	9	layer	layer	NOUN
fumecheng-7594	83	10	can	can	AUX
fumecheng-7594	83	11	randomly	randomly	VERB
fumecheng-7594	83	12	vary	vary	VERB
fumecheng-7594	83	13	and	and	CCONJ
fumecheng-7594	83	14	can	can	AUX
fumecheng-7594	83	15	not	not	PART
fumecheng-7594	83	16	be	be	AUX
fumecheng-7594	83	17	well	well	ADV
fumecheng-7594	83	18	controlled	control	VERB
fumecheng-7594	83	19	.	.	PUNCT
fumecheng-7594	84	1	the	the	DET
fumecheng-7594	84	2	configuration	configuration	NOUN
fumecheng-7594	84	3	and	and	CCONJ
fumecheng-7594	84	4	the	the	DET
fumecheng-7594	84	5	thickness	thickness	NOUN
fumecheng-7594	84	6	of	of	ADP
fumecheng-7594	84	7	the	the	DET
fumecheng-7594	84	8	glue	glue	NOUN
fumecheng-7594	84	9	layer	layer	NOUN
fumecheng-7594	84	10	between	between	ADP
fumecheng-7594	84	11	the	the	DET
fumecheng-7594	84	12	ruby	ruby	PROPN
fumecheng-7594	84	13	hemisphere	hemisphere	ADV
fumecheng-7594	84	14	and	and	CCONJ
fumecheng-7594	84	15	the	the	DET
fumecheng-7594	84	16	piezo	piezo	PROPN
fumecheng-7594	84	17	element	element	NOUN
fumecheng-7594	84	18	,	,	PUNCT
fumecheng-7594	84	19	and	and	CCONJ
fumecheng-7594	84	20	their	their	PRON
fumecheng-7594	84	21	relative	relative	ADJ
fumecheng-7594	84	22	position	position	NOUN
fumecheng-7594	84	23	,	,	PUNCT
fumecheng-7594	84	24	are	be	AUX
fumecheng-7594	84	25	proved	prove	VERB
fumecheng-7594	84	26	to	to	PART
fumecheng-7594	84	27	strongly	strongly	ADV
fumecheng-7594	84	28	impact	impact	VERB
fumecheng-7594	84	29	the	the	DET
fumecheng-7594	84	30	stiffness	stiffness	NOUN
fumecheng-7594	84	31	and	and	CCONJ
fumecheng-7594	84	32	the	the	DET
fumecheng-7594	84	33	displacement	displacement	ADJ
fumecheng-7594	84	34	amplitude	amplitude	NOUN
fumecheng-7594	84	35	of	of	ADP
fumecheng-7594	84	36	the	the	DET
fumecheng-7594	84	37	actuators	actuator	NOUN
fumecheng-7594	84	38	[	[	X
fumecheng-7594	84	39	21	21	NUM
fumecheng-7594	84	40	]	]	PUNCT
fumecheng-7594	84	41	.	.	PUNCT
fumecheng-7594	85	1	therefore	therefore	ADV
fumecheng-7594	85	2	,	,	PUNCT
fumecheng-7594	85	3	discrepancies	discrepancy	NOUN
fumecheng-7594	85	4	in	in	ADP
fumecheng-7594	85	5	the	the	DET
fumecheng-7594	85	6	stiffness	stiffness	NOUN
fumecheng-7594	85	7	and	and	CCONJ
fumecheng-7594	85	8	the	the	DET
fumecheng-7594	85	9	displacement	displacement	ADJ
fumecheng-7594	85	10	amplitude	amplitude	NOUN
fumecheng-7594	85	11	among	among	ADP
fumecheng-7594	85	12	actuators	actuator	NOUN
fumecheng-7594	85	13	are	be	AUX
fumecheng-7594	85	14	visible	visible	ADJ
fumecheng-7594	85	15	;	;	PUNCT
fumecheng-7594	85	16	ii	ii	X
fumecheng-7594	85	17	)	)	PUNCT
fumecheng-7594	85	18	the	the	DET
fumecheng-7594	85	19	geometrical	geometrical	ADJ
fumecheng-7594	85	20	errors	error	NOUN
fumecheng-7594	85	21	caused	cause	VERB
fumecheng-7594	85	22	by	by	ADP
fumecheng-7594	85	23	the	the	DET
fumecheng-7594	85	24	assembly	assembly	NOUN
fumecheng-7594	85	25	of	of	ADP
fumecheng-7594	85	26	each	each	DET
fumecheng-7594	85	27	block	block	NOUN
fumecheng-7594	85	28	of	of	ADP
fumecheng-7594	85	29	actuators	actuator	NOUN
fumecheng-7594	85	30	and	and	CCONJ
fumecheng-7594	85	31	their	their	PRON
fumecheng-7594	85	32	attachment	attachment	NOUN
fumecheng-7594	85	33	to	to	ADP
fumecheng-7594	85	34	the	the	DET
fumecheng-7594	85	35	actuator	actuator	NOUN
fumecheng-7594	85	36	holder	holder	NOUN
fumecheng-7594	85	37	,	,	PUNCT
fumecheng-7594	85	38	can	can	AUX
fumecheng-7594	85	39	change	change	VERB
fumecheng-7594	85	40	the	the	DET
fumecheng-7594	85	41	contact	contact	NOUN
fumecheng-7594	85	42	angle	angle	NOUN
fumecheng-7594	85	43	and	and	CCONJ
fumecheng-7594	85	44	contact	contact	NOUN
fumecheng-7594	85	45	point	point	NOUN
fumecheng-7594	85	46	between	between	ADP
fumecheng-7594	85	47	the	the	DET
fumecheng-7594	85	48	hemisphere	hemisphere	NOUN
fumecheng-7594	85	49	of	of	ADP
fumecheng-7594	85	50	the	the	DET
fumecheng-7594	85	51	actuator	actuator	NOUN
fumecheng-7594	85	52	and	and	CCONJ
fumecheng-7594	85	53	the	the	DET
fumecheng-7594	85	54	runner	runner	NOUN
fumecheng-7594	85	55	’s	’s	PART
fumecheng-7594	85	56	surfaces	surface	NOUN
fumecheng-7594	85	57	(	(	PUNCT
fumecheng-7594	85	58	see	see	VERB
fumecheng-7594	85	59	fig	fig	NOUN
fumecheng-7594	85	60	.	.	PUNCT
fumecheng-7594	85	61	2b	2b	NUM
fumecheng-7594	85	62	)	)	PUNCT
fumecheng-7594	85	63	.	.	PUNCT
fumecheng-7594	86	1	this	this	PRON
fumecheng-7594	86	2	leads	lead	VERB
fumecheng-7594	86	3	to	to	ADP
fumecheng-7594	86	4	discrepancies	discrepancy	NOUN
fumecheng-7594	86	5	in	in	ADP
fumecheng-7594	86	6	the	the	DET
fumecheng-7594	86	7	displacement	displacement	ADJ
fumecheng-7594	86	8	amplitude	amplitude	NOUN
fumecheng-7594	86	9	of	of	ADP
fumecheng-7594	86	10	the	the	DET
fumecheng-7594	86	11	actuators	actuator	NOUN
fumecheng-7594	86	12	as	as	ADV
fumecheng-7594	86	13	well	well	ADV
fumecheng-7594	86	14	as	as	ADP
fumecheng-7594	86	15	the	the	DET
fumecheng-7594	86	16	normal	normal	ADJ
fumecheng-7594	86	17	force	force	NOUN
fumecheng-7594	86	18	pressed	press	VERB
fumecheng-7594	86	19	on	on	ADP
fumecheng-7594	86	20	each	each	DET
fumecheng-7594	86	21	contact	contact	NOUN
fumecheng-7594	86	22	.	.	PUNCT
fumecheng-7594	87	1	in	in	ADP
fumecheng-7594	87	2	this	this	DET
fumecheng-7594	87	3	work	work	NOUN
fumecheng-7594	87	4	,	,	PUNCT
fumecheng-7594	87	5	influences	influence	NOUN
fumecheng-7594	87	6	of	of	ADP
fumecheng-7594	87	7	the	the	DET
fumecheng-7594	87	8	discrepancy	discrepancy	NOUN
fumecheng-7594	87	9	of	of	ADP
fumecheng-7594	87	10	stiffness	stiffness	NOUN
fumecheng-7594	87	11	/	/	SYM
fumecheng-7594	87	12	damping	damping	NOUN
fumecheng-7594	87	13	,	,	PUNCT
fumecheng-7594	87	14	the	the	DET
fumecheng-7594	87	15	displacement	displacement	ADJ
fumecheng-7594	87	16	amplitude	amplitude	NOUN
fumecheng-7594	87	17	among	among	ADP
fumecheng-7594	87	18	actuators	actuator	NOUN
fumecheng-7594	87	19	,	,	PUNCT
fumecheng-7594	87	20	and	and	CCONJ
fumecheng-7594	87	21	the	the	DET
fumecheng-7594	87	22	normal	normal	ADJ
fumecheng-7594	87	23	force	force	NOUN
fumecheng-7594	87	24	of	of	ADP
fumecheng-7594	87	25	each	each	DET
fumecheng-7594	87	26	contact	contact	NOUN
fumecheng-7594	87	27	on	on	ADP
fumecheng-7594	87	28	operational	operational	ADJ
fumecheng-7594	87	29	characteristics	characteristic	NOUN
fumecheng-7594	87	30	of	of	ADP
fumecheng-7594	87	31	the	the	DET
fumecheng-7594	87	32	investigated	investigate	VERB
fumecheng-7594	87	33	drive	drive	NOUN
fumecheng-7594	87	34	are	be	AUX
fumecheng-7594	87	35	modelled	model	VERB
fumecheng-7594	87	36	and	and	CCONJ
fumecheng-7594	87	37	simulated	simulate	VERB
fumecheng-7594	87	38	.	.	PUNCT
fumecheng-7594	88	1	fig	fig	NOUN
fumecheng-7594	88	2	.	.	PUNCT
fumecheng-7594	89	1	2	2	NUM
fumecheng-7594	89	2	cad	cad	NOUN
fumecheng-7594	89	3	-	-	PUNCT
fumecheng-7594	89	4	based	base	VERB
fumecheng-7594	89	5	schematic	schematic	ADJ
fumecheng-7594	89	6	view	view	NOUN
fumecheng-7594	89	7	of	of	ADP
fumecheng-7594	89	8	actuator	actuator	NOUN
fumecheng-7594	89	9	design	design	NOUN
fumecheng-7594	89	10	:	:	PUNCT
fumecheng-7594	89	11	(	(	PUNCT
fumecheng-7594	89	12	a	a	X
fumecheng-7594	89	13	)	)	PUNCT
fumecheng-7594	89	14	the	the	DET
fumecheng-7594	89	15	structured	structure	VERB
fumecheng-7594	89	16	piezo	piezo	X
fumecheng-7594	89	17	;	;	PUNCT
fumecheng-7594	89	18	(	(	PUNCT
fumecheng-7594	89	19	b	b	X
fumecheng-7594	89	20	)	)	PUNCT
fumecheng-7594	89	21	the	the	DET
fumecheng-7594	89	22	assembly	assembly	NOUN
fumecheng-7594	89	23	of	of	ADP
fumecheng-7594	89	24	the	the	DET
fumecheng-7594	89	25	actuators	actuator	NOUN
fumecheng-7594	89	26	[	[	X
fumecheng-7594	89	27	3	3	X
fumecheng-7594	89	28	]	]	SYM
fumecheng-7594	89	29	2.3	2.3	NUM
fumecheng-7594	89	30	.	.	PUNCT
fumecheng-7594	90	1	measurement	measurement	NOUN
fumecheng-7594	90	2	results	result	VERB
fumecheng-7594	90	3	the	the	DET
fumecheng-7594	90	4	experimental	experimental	ADJ
fumecheng-7594	90	5	results	result	NOUN
fumecheng-7594	90	6	shown	show	VERB
fumecheng-7594	90	7	in	in	ADP
fumecheng-7594	90	8	fig	fig	NOUN
fumecheng-7594	90	9	.	.	PUNCT
fumecheng-7594	91	1	3	3	NUM
fumecheng-7594	91	2	are	be	AUX
fumecheng-7594	91	3	presented	present	VERB
fumecheng-7594	91	4	in	in	ADP
fumecheng-7594	91	5	this	this	DET
fumecheng-7594	91	6	paper	paper	NOUN
fumecheng-7594	91	7	for	for	ADP
fumecheng-7594	91	8	the	the	DET
fumecheng-7594	91	9	first	first	ADJ
fumecheng-7594	91	10	time	time	NOUN
fumecheng-7594	91	11	.	.	PUNCT
fumecheng-7594	92	1	the	the	DET
fumecheng-7594	92	2	graphs	graph	NOUN
fumecheng-7594	92	3	present	present	ADJ
fumecheng-7594	92	4	measurements	measurement	NOUN
fumecheng-7594	92	5	of	of	ADP
fumecheng-7594	92	6	the	the	DET
fumecheng-7594	92	7	step	step	NOUN
fumecheng-7594	92	8	length	length	NOUN
fumecheng-7594	92	9	of	of	ADP
fumecheng-7594	92	10	the	the	DET
fumecheng-7594	92	11	runner	runner	NOUN
fumecheng-7594	92	12	at	at	ADP
fumecheng-7594	92	13	different	different	ADJ
fumecheng-7594	92	14	contact	contact	NOUN
fumecheng-7594	92	15	positions	position	NOUN
fumecheng-7594	92	16	between	between	ADP
fumecheng-7594	92	17	the	the	DET
fumecheng-7594	92	18	runner	runner	NOUN
fumecheng-7594	92	19	’s	’s	PART
fumecheng-7594	92	20	surfaces	surface	NOUN
fumecheng-7594	92	21	and	and	CCONJ
fumecheng-7594	92	22	the	the	DET
fumecheng-7594	92	23	actuators	actuator	NOUN
fumecheng-7594	92	24	.	.	PUNCT
fumecheng-7594	93	1	the	the	DET
fumecheng-7594	93	2	level	level	NOUN
fumecheng-7594	93	3	of	of	ADP
fumecheng-7594	93	4	the	the	DET
fumecheng-7594	93	5	preload	preload	NOUN
fumecheng-7594	93	6	is	be	AUX
fumecheng-7594	93	7	also	also	ADV
fumecheng-7594	93	8	varied	varied	ADJ
fumecheng-7594	93	9	.	.	PUNCT
fumecheng-7594	94	1	for	for	ADP
fumecheng-7594	94	2	each	each	DET
fumecheng-7594	94	3	level	level	NOUN
fumecheng-7594	94	4	of	of	ADP
fumecheng-7594	94	5	the	the	DET
fumecheng-7594	94	6	preload	preload	NOUN
fumecheng-7594	94	7	,	,	PUNCT
fumecheng-7594	94	8	measurements	measurement	NOUN
fumecheng-7594	94	9	of	of	ADP
fumecheng-7594	94	10	ten	ten	NUM
fumecheng-7594	94	11	measured	measure	VERB
fumecheng-7594	94	12	positions	position	NOUN
fumecheng-7594	94	13	are	be	AUX
fumecheng-7594	94	14	randomly	randomly	ADV
fumecheng-7594	94	15	chosen	choose	VERB
fumecheng-7594	94	16	to	to	PART
fumecheng-7594	94	17	be	be	AUX
fumecheng-7594	94	18	drawn	draw	VERB
fumecheng-7594	94	19	.	.	PUNCT
fumecheng-7594	95	1	fig	fig	NOUN
fumecheng-7594	95	2	.	.	PUNCT
fumecheng-7594	96	1	3a	3a	PROPN
fumecheng-7594	96	2	presents	present	VERB
fumecheng-7594	96	3	data	datum	NOUN
fumecheng-7594	96	4	with	with	ADP
fumecheng-7594	96	5	the	the	DET
fumecheng-7594	96	6	case	case	NOUN
fumecheng-7594	96	7	of	of	ADP
fumecheng-7594	96	8	the	the	DET
fumecheng-7594	96	9	radius	radius	NOUN
fumecheng-7594	96	10	of	of	ADP
fumecheng-7594	96	11	the	the	DET
fumecheng-7594	96	12	ruby	ruby	PROPN
fumecheng-7594	96	13	hemispheres	hemisphere	NOUN
fumecheng-7594	96	14	𝑅	𝑅	PROPN
fumecheng-7594	96	15	=	=	PROPN
fumecheng-7594	96	16	1𝑚𝑚	1𝑚𝑚	NOUN
fumecheng-7594	96	17	and	and	CCONJ
fumecheng-7594	96	18	fig	fig	NOUN
fumecheng-7594	96	19	.	.	PUNCT
fumecheng-7594	97	1	3b	3b	NOUN
fumecheng-7594	97	2	for	for	ADP
fumecheng-7594	97	3	𝑅	𝑅	PROPN
fumecheng-7594	97	4	=	=	PROPN
fumecheng-7594	97	5	0.25𝑚𝑚.	0.25𝑚𝑚.	PROPN
fumecheng-7594	97	6	in	in	ADP
fumecheng-7594	97	7	fig	fig	NOUN
fumecheng-7594	97	8	.	.	PUNCT
fumecheng-7594	98	1	3a	3a	NUM
fumecheng-7594	98	2	,	,	PUNCT
fumecheng-7594	98	3	with	with	ADP
fumecheng-7594	98	4	the	the	DET
fumecheng-7594	98	5	case	case	NOUN
fumecheng-7594	98	6	𝑅	𝑅	PROPN
fumecheng-7594	98	7	=	=	PROPN
fumecheng-7594	98	8	1𝑚𝑚	1𝑚𝑚	NOUN
fumecheng-7594	98	9	and	and	CCONJ
fumecheng-7594	98	10	the	the	DET
fumecheng-7594	98	11	level	level	NOUN
fumecheng-7594	98	12	of	of	ADP
fumecheng-7594	98	13	the	the	DET
fumecheng-7594	98	14	preload	preload	NOUN
fumecheng-7594	98	15	𝐹𝑝	𝐹𝑝	PROPN
fumecheng-7594	98	16	=	=	PUNCT
fumecheng-7594	98	17	0.2𝑁	0.2𝑁	PROPN
fumecheng-7594	98	18	,	,	PUNCT
fumecheng-7594	98	19	the	the	DET
fumecheng-7594	98	20	discrepancy	discrepancy	NOUN
fumecheng-7594	98	21	between	between	ADP
fumecheng-7594	98	22	the	the	DET
fumecheng-7594	98	23	maximal	maximal	ADJ
fumecheng-7594	98	24	step	step	NOUN
fumecheng-7594	98	25	length	length	NOUN
fumecheng-7594	98	26	and	and	CCONJ
fumecheng-7594	98	27	the	the	DET
fumecheng-7594	98	28	minimal	minimal	ADJ
fumecheng-7594	98	29	one	one	NUM
fumecheng-7594	98	30	is	be	AUX
fumecheng-7594	98	31	22𝑛𝑚	22𝑛𝑚	NOUN
fumecheng-7594	98	32	while	while	SCONJ
fumecheng-7594	98	33	the	the	DET
fumecheng-7594	98	34	average	average	NOUN
fumecheng-7594	98	35	of	of	ADP
fumecheng-7594	98	36	the	the	DET
fumecheng-7594	98	37	step	step	NOUN
fumecheng-7594	98	38	length	length	NOUN
fumecheng-7594	98	39	is	be	AUX
fumecheng-7594	98	40	149𝑛𝑚.	149𝑛𝑚.	NUM
fumecheng-7594	98	41	the	the	DET
fumecheng-7594	98	42	maximal	maximal	ADJ
fumecheng-7594	98	43	standard	standard	ADJ
fumecheng-7594	98	44	deviation	deviation	NOUN
fumecheng-7594	98	45	is	be	AUX
fumecheng-7594	98	46	8.6	8.6	NUM
fumecheng-7594	98	47	%	%	NOUN
fumecheng-7594	98	48	.	.	PUNCT
fumecheng-7594	99	1	for	for	ADP
fumecheng-7594	99	2	the	the	DET
fumecheng-7594	99	3	higher	high	ADJ
fumecheng-7594	99	4	preload	preload	NOUN
fumecheng-7594	99	5	𝐹𝑝	𝐹𝑝	PROPN
fumecheng-7594	99	6	=	=	PUNCT
fumecheng-7594	99	7	1𝑁	1𝑁	VERB
fumecheng-7594	99	8	the	the	DET
fumecheng-7594	99	9	discrepancy	discrepancy	NOUN
fumecheng-7594	99	10	of	of	ADP
fumecheng-7594	99	11	the	the	DET
fumecheng-7594	99	12	step	step	NOUN
fumecheng-7594	99	13	length	length	NOUN
fumecheng-7594	99	14	increases	increase	VERB
fumecheng-7594	99	15	with	with	ADP
fumecheng-7594	99	16	the	the	DET
fumecheng-7594	99	17	standard	standard	ADJ
fumecheng-7594	99	18	deviation	deviation	NOUN
fumecheng-7594	99	19	of	of	ADP
fumecheng-7594	99	20	13.4	13.4	NUM
fumecheng-7594	99	21	%	%	NOUN
fumecheng-7594	99	22	.	.	PUNCT
fumecheng-7594	100	1	thus	thus	ADV
fumecheng-7594	100	2	,	,	PUNCT
fumecheng-7594	100	3	for	for	ADP
fumecheng-7594	100	4	this	this	DET
fumecheng-7594	100	5	case	case	NOUN
fumecheng-7594	100	6	the	the	DET
fumecheng-7594	100	7	repeatability	repeatability	NOUN
fumecheng-7594	100	8	is	be	AUX
fumecheng-7594	100	9	reduced	reduce	VERB
fumecheng-7594	100	10	.	.	PUNCT
fumecheng-7594	101	1	in	in	ADP
fumecheng-7594	101	2	fig	fig	NOUN
fumecheng-7594	101	3	.	.	PUNCT
fumecheng-7594	102	1	3b	3b	NUM
fumecheng-7594	102	2	,	,	PUNCT
fumecheng-7594	102	3	for	for	ADP
fumecheng-7594	102	4	the	the	DET
fumecheng-7594	102	5	case	case	NOUN
fumecheng-7594	102	6	𝑅	𝑅	PROPN
fumecheng-7594	102	7	=	=	PUNCT
fumecheng-7594	102	8	0.25𝑚𝑚	0.25𝑚𝑚	NOUN
fumecheng-7594	102	9	and	and	CCONJ
fumecheng-7594	102	10	𝐹𝑝	𝐹𝑝	PROPN
fumecheng-7594	102	11	=	=	PUNCT
fumecheng-7594	102	12	0.5𝑁	0.5𝑁	PROPN
fumecheng-7594	102	13	,	,	PUNCT
fumecheng-7594	102	14	the	the	DET
fumecheng-7594	102	15	repeatability	repeatability	NOUN
fumecheng-7594	102	16	of	of	ADP
fumecheng-7594	102	17	the	the	DET
fumecheng-7594	102	18	step	step	NOUN
fumecheng-7594	102	19	length	length	NOUN
fumecheng-7594	102	20	is	be	AUX
fumecheng-7594	102	21	very	very	ADV
fumecheng-7594	102	22	low	low	ADJ
fumecheng-7594	102	23	.	.	PUNCT
fumecheng-7594	103	1	the	the	DET
fumecheng-7594	103	2	measured	measure	VERB
fumecheng-7594	103	3	step	step	NOUN
fumecheng-7594	103	4	lengths	length	NOUN
fumecheng-7594	103	5	have	have	VERB
fumecheng-7594	103	6	a	a	DET
fumecheng-7594	103	7	large	large	ADJ
fumecheng-7594	103	8	discrepancy	discrepancy	NOUN
fumecheng-7594	103	9	with	with	ADP
fumecheng-7594	103	10	a	a	DET
fumecheng-7594	103	11	maximum	maximum	NOUN
fumecheng-7594	103	12	of	of	ADP
fumecheng-7594	103	13	35𝑛𝑚	35𝑛𝑚	NOUN
fumecheng-7594	103	14	in	in	ADP
fumecheng-7594	103	15	an	an	DET
fumecheng-7594	103	16	average	average	NOUN
fumecheng-7594	103	17	of	of	ADP
fumecheng-7594	103	18	47.2𝑛𝑚.	47.2𝑛𝑚.	NUM
fumecheng-7594	103	19	the	the	DET
fumecheng-7594	103	20	maximal	maximal	ADJ
fumecheng-7594	103	21	standard	standard	ADJ
fumecheng-7594	103	22	deviation	deviation	NOUN
fumecheng-7594	103	23	is	be	AUX
fumecheng-7594	103	24	41.3	41.3	NUM
fumecheng-7594	103	25	%	%	NOUN
fumecheng-7594	103	26	.	.	PUNCT
fumecheng-7594	104	1	with	with	ADP
fumecheng-7594	104	2	𝐹𝑝	𝐹𝑝	PROPN
fumecheng-7594	104	3	=	=	PROPN
fumecheng-7594	104	4	0.2𝑁	0.2𝑁	PROPN
fumecheng-7594	104	5	,	,	PUNCT
fumecheng-7594	104	6	the	the	DET
fumecheng-7594	104	7	repeatability	repeatability	NOUN
fumecheng-7594	104	8	is	be	AUX
fumecheng-7594	104	9	better	well	ADJ
fumecheng-7594	104	10	.	.	PUNCT
fumecheng-7594	105	1	114	114	NUM
fumecheng-7594	105	2	h.	h.	PROPN
fumecheng-7594	105	3	x.	x.	PROPN
fumecheng-7594	105	4	nguyen	nguyen	PROPN
fumecheng-7594	105	5	,	,	PUNCT
fumecheng-7594	105	6	a.	a.	PROPN
fumecheng-7594	105	7	h.	h.	PROPN
fumecheng-7594	105	8	nguyen	nguyen	PROPN
fumecheng-7594	105	9	fig	fig	PROPN
fumecheng-7594	105	10	.	.	PUNCT
fumecheng-7594	106	1	3	3	NUM
fumecheng-7594	106	2	the	the	DET
fumecheng-7594	106	3	repeatability	repeatability	NOUN
fumecheng-7594	106	4	of	of	ADP
fumecheng-7594	106	5	the	the	DET
fumecheng-7594	106	6	step	step	NOUN
fumecheng-7594	106	7	length	length	NOUN
fumecheng-7594	106	8	:	:	PUNCT
fumecheng-7594	106	9	(	(	PUNCT
fumecheng-7594	106	10	a	a	X
fumecheng-7594	106	11	)	)	PUNCT
fumecheng-7594	106	12	𝑅	𝑅	NOUN
fumecheng-7594	106	13	=	=	NOUN
fumecheng-7594	106	14	1	1	NUM
fumecheng-7594	106	15	𝑚𝑚	𝑚𝑚	NOUN
fumecheng-7594	106	16	;	;	PUNCT
fumecheng-7594	106	17	(	(	PUNCT
fumecheng-7594	106	18	b	b	X
fumecheng-7594	106	19	)	)	PUNCT
fumecheng-7594	106	20	𝑅	𝑅	NOUN
fumecheng-7594	106	21	=	=	NOUN
fumecheng-7594	106	22	0.25	0.25	NUM
fumecheng-7594	106	23	𝑚𝑚	𝑚𝑚	ADP
fumecheng-7594	106	24	in	in	ADP
fumecheng-7594	106	25	fig	fig	NOUN
fumecheng-7594	106	26	.	.	PUNCT
fumecheng-7594	107	1	4	4	NUM
fumecheng-7594	107	2	,	,	PUNCT
fumecheng-7594	107	3	the	the	DET
fumecheng-7594	107	4	dependency	dependency	NOUN
fumecheng-7594	107	5	of	of	ADP
fumecheng-7594	107	6	the	the	DET
fumecheng-7594	107	7	critical	critical	ADJ
fumecheng-7594	107	8	amplitude	amplitude	NOUN
fumecheng-7594	107	9	on	on	ADP
fumecheng-7594	107	10	the	the	DET
fumecheng-7594	107	11	preload	preload	NOUN
fumecheng-7594	107	12	for	for	ADP
fumecheng-7594	107	13	different	different	ADJ
fumecheng-7594	107	14	ruby	ruby	NOUN
fumecheng-7594	107	15	hemispheres	hemisphere	NOUN
fumecheng-7594	107	16	radii	radius	NOUN
fumecheng-7594	107	17	is	be	AUX
fumecheng-7594	107	18	presented	present	VERB
fumecheng-7594	107	19	.	.	PUNCT
fumecheng-7594	108	1	we	we	PRON
fumecheng-7594	108	2	consider	consider	VERB
fumecheng-7594	108	3	the	the	DET
fumecheng-7594	108	4	error	error	NOUN
fumecheng-7594	108	5	bar	bar	NOUN
fumecheng-7594	108	6	in	in	ADP
fumecheng-7594	108	7	the	the	DET
fumecheng-7594	108	8	graphs	graph	NOUN
fumecheng-7594	108	9	.	.	PUNCT
fumecheng-7594	109	1	it	it	PRON
fumecheng-7594	109	2	is	be	AUX
fumecheng-7594	109	3	visible	visible	ADJ
fumecheng-7594	109	4	that	that	SCONJ
fumecheng-7594	109	5	the	the	DET
fumecheng-7594	109	6	error	error	NOUN
fumecheng-7594	109	7	bar	bar	NOUN
fumecheng-7594	109	8	becomes	become	VERB
fumecheng-7594	109	9	larger	large	ADJ
fumecheng-7594	109	10	when	when	SCONJ
fumecheng-7594	109	11	the	the	DET
fumecheng-7594	109	12	level	level	NOUN
fumecheng-7594	109	13	of	of	ADP
fumecheng-7594	109	14	the	the	DET
fumecheng-7594	109	15	preload	preload	NOUN
fumecheng-7594	109	16	increases	increase	NOUN
fumecheng-7594	109	17	.	.	PUNCT
fumecheng-7594	110	1	also	also	ADV
fumecheng-7594	110	2	,	,	PUNCT
fumecheng-7594	110	3	if	if	SCONJ
fumecheng-7594	110	4	the	the	DET
fumecheng-7594	110	5	radius	radius	NOUN
fumecheng-7594	110	6	of	of	ADP
fumecheng-7594	110	7	the	the	DET
fumecheng-7594	110	8	ruby	ruby	PROPN
fumecheng-7594	110	9	hemispheres	hemisphere	NOUN
fumecheng-7594	110	10	is	be	AUX
fumecheng-7594	110	11	reduced	reduce	VERB
fumecheng-7594	110	12	,	,	PUNCT
fumecheng-7594	110	13	the	the	DET
fumecheng-7594	110	14	error	error	NOUN
fumecheng-7594	110	15	bar	bar	NOUN
fumecheng-7594	110	16	increases	increase	VERB
fumecheng-7594	110	17	slightly	slightly	ADV
fumecheng-7594	110	18	.	.	PUNCT
fumecheng-7594	111	1	experimental	experimental	ADJ
fumecheng-7594	111	2	evidence	evidence	NOUN
fumecheng-7594	111	3	shows	show	VERB
fumecheng-7594	111	4	that	that	SCONJ
fumecheng-7594	111	5	with	with	ADP
fumecheng-7594	111	6	the	the	DET
fumecheng-7594	111	7	case	case	NOUN
fumecheng-7594	111	8	𝑅	𝑅	PROPN
fumecheng-7594	111	9	=	=	PUNCT
fumecheng-7594	111	10	0.25𝑚𝑚	0.25𝑚𝑚	NOUN
fumecheng-7594	111	11	and	and	CCONJ
fumecheng-7594	111	12	the	the	DET
fumecheng-7594	111	13	preload	preload	NOUN
fumecheng-7594	111	14	higher	high	ADJ
fumecheng-7594	111	15	than	than	SCONJ
fumecheng-7594	111	16	0.5𝑁	0.5𝑁	NOUN
fumecheng-7594	111	17	the	the	DET
fumecheng-7594	111	18	repeatability	repeatability	NOUN
fumecheng-7594	111	19	of	of	ADP
fumecheng-7594	111	20	the	the	DET
fumecheng-7594	111	21	measurement	measurement	NOUN
fumecheng-7594	111	22	is	be	AUX
fumecheng-7594	111	23	very	very	ADV
fumecheng-7594	111	24	low	low	ADJ
fumecheng-7594	111	25	even	even	ADV
fumecheng-7594	111	26	the	the	DET
fumecheng-7594	111	27	runner	runner	NOUN
fumecheng-7594	111	28	can	can	AUX
fumecheng-7594	111	29	not	not	PART
fumecheng-7594	111	30	perform	perform	VERB
fumecheng-7594	111	31	a	a	DET
fumecheng-7594	111	32	reliable	reliable	ADJ
fumecheng-7594	111	33	movement	movement	NOUN
fumecheng-7594	111	34	.	.	PUNCT
fumecheng-7594	112	1	a	a	DET
fumecheng-7594	112	2	maximal	maximal	ADJ
fumecheng-7594	112	3	discrepancy	discrepancy	NOUN
fumecheng-7594	112	4	between	between	ADP
fumecheng-7594	112	5	measured	measure	VERB
fumecheng-7594	112	6	values	value	NOUN
fumecheng-7594	112	7	of	of	ADP
fumecheng-7594	112	8	the	the	DET
fumecheng-7594	112	9	critical	critical	ADJ
fumecheng-7594	112	10	amplitude	amplitude	NOUN
fumecheng-7594	112	11	is	be	AUX
fumecheng-7594	112	12	8.2	8.2	NUM
fumecheng-7594	112	13	%	%	NOUN
fumecheng-7594	112	14	at	at	ADP
fumecheng-7594	112	15	a	a	DET
fumecheng-7594	112	16	preload	preload	NOUN
fumecheng-7594	112	17	of	of	ADP
fumecheng-7594	112	18	0.5𝑁	0.5𝑁	NOUN
fumecheng-7594	112	19	and	and	CCONJ
fumecheng-7594	112	20	𝑅	𝑅	PROPN
fumecheng-7594	112	21	=	=	NOUN
fumecheng-7594	112	22	0.25𝑚𝑚	0.25𝑚𝑚	NOUN
fumecheng-7594	112	23	,	,	PUNCT
fumecheng-7594	112	24	and	and	CCONJ
fumecheng-7594	112	25	6.8	6.8	NUM
fumecheng-7594	112	26	%	%	NOUN
fumecheng-7594	112	27	at	at	ADP
fumecheng-7594	112	28	a	a	DET
fumecheng-7594	112	29	preload	preload	NOUN
fumecheng-7594	112	30	of	of	ADP
fumecheng-7594	112	31	1.2𝑁	1.2𝑁	NOUN
fumecheng-7594	112	32	and	and	CCONJ
fumecheng-7594	112	33	𝑅	𝑅	PROPN
fumecheng-7594	112	34	=	=	PROPN
fumecheng-7594	112	35	1𝑚𝑚.	1𝑚𝑚.	NUM
fumecheng-7594	112	36	fig	fig	NOUN
fumecheng-7594	112	37	.	.	PUNCT
fumecheng-7594	113	1	4	4	NUM
fumecheng-7594	113	2	the	the	DET
fumecheng-7594	113	3	repeatability	repeatability	NOUN
fumecheng-7594	113	4	of	of	ADP
fumecheng-7594	113	5	critical	critical	ADJ
fumecheng-7594	113	6	amplitude	amplitude	NOUN
fumecheng-7594	113	7	depending	depend	VERB
fumecheng-7594	113	8	on	on	ADP
fumecheng-7594	113	9	the	the	DET
fumecheng-7594	113	10	preload	preload	NOUN
fumecheng-7594	113	11	for	for	ADP
fumecheng-7594	113	12	different	different	ADJ
fumecheng-7594	113	13	ruby	ruby	NOUN
fumecheng-7594	113	14	hemispheres	hemisphere	NOUN
fumecheng-7594	113	15	radii	radii	VERB
fumecheng-7594	113	16	fig	fig	NOUN
fumecheng-7594	113	17	.	.	PUNCT
fumecheng-7594	114	1	5	5	NUM
fumecheng-7594	114	2	shows	show	VERB
fumecheng-7594	114	3	the	the	DET
fumecheng-7594	114	4	measurement	measurement	NOUN
fumecheng-7594	114	5	of	of	ADP
fumecheng-7594	114	6	the	the	DET
fumecheng-7594	114	7	runner	runner	NOUN
fumecheng-7594	114	8	’s	’s	PART
fumecheng-7594	114	9	velocity	velocity	NOUN
fumecheng-7594	114	10	which	which	PRON
fumecheng-7594	114	11	depends	depend	VERB
fumecheng-7594	114	12	on	on	ADP
fumecheng-7594	114	13	the	the	DET
fumecheng-7594	114	14	driving	drive	VERB
fumecheng-7594	114	15	frequency	frequency	NOUN
fumecheng-7594	114	16	for	for	ADP
fumecheng-7594	114	17	the	the	DET
fumecheng-7594	114	18	case	case	NOUN
fumecheng-7594	114	19	the	the	DET
fumecheng-7594	114	20	radius	radius	NOUN
fumecheng-7594	114	21	of	of	ADP
fumecheng-7594	114	22	the	the	DET
fumecheng-7594	114	23	ruby	ruby	PROPN
fumecheng-7594	114	24	hemispheres	hemisphere	NOUN
fumecheng-7594	114	25	𝑅	𝑅	PROPN
fumecheng-7594	114	26	=	=	PROPN
fumecheng-7594	114	27	0.5𝑚𝑚	0.5𝑚𝑚	PROPN
fumecheng-7594	114	28	and	and	CCONJ
fumecheng-7594	114	29	a	a	DET
fumecheng-7594	114	30	preload	preload	NOUN
fumecheng-7594	115	1	𝐹𝑁	𝐹𝑁	NOUN
fumecheng-7594	115	2	=	=	NOUN
fumecheng-7594	115	3	0.4𝑁.	0.4𝑁.	NOUN
fumecheng-7594	115	4	at	at	ADP
fumecheng-7594	115	5	each	each	DET
fumecheng-7594	115	6	represented	represent	VERB
fumecheng-7594	115	7	point	point	NOUN
fumecheng-7594	115	8	,	,	PUNCT
fumecheng-7594	115	9	an	an	DET
fumecheng-7594	115	10	error	error	NOUN
fumecheng-7594	115	11	bar	bar	NOUN
fumecheng-7594	115	12	is	be	AUX
fumecheng-7594	115	13	shown	show	VERB
fumecheng-7594	115	14	which	which	PRON
fumecheng-7594	115	15	presents	present	VERB
fumecheng-7594	115	16	the	the	DET
fumecheng-7594	115	17	repeatability	repeatability	NOUN
fumecheng-7594	115	18	of	of	ADP
fumecheng-7594	115	19	ten	ten	NUM
fumecheng-7594	115	20	measurements	measurement	NOUN
fumecheng-7594	115	21	.	.	PUNCT
fumecheng-7594	116	1	the	the	DET
fumecheng-7594	116	2	driving	drive	VERB
fumecheng-7594	116	3	frequency	frequency	NOUN
fumecheng-7594	116	4	is	be	AUX
fumecheng-7594	116	5	varied	varied	ADJ
fumecheng-7594	116	6	in	in	ADP
fumecheng-7594	116	7	a	a	DET
fumecheng-7594	116	8	range	range	NOUN
fumecheng-7594	116	9	from	from	ADP
fumecheng-7594	116	10	4.72	4.72	NUM
fumecheng-7594	116	11	to	to	ADP
fumecheng-7594	116	12	34.66𝑘𝐻𝑧.	34.66𝑘𝐻𝑧.	NUM
fumecheng-7594	116	13	it	it	PRON
fumecheng-7594	116	14	is	be	AUX
fumecheng-7594	116	15	clearly	clearly	ADV
fumecheng-7594	116	16	seen	see	VERB
fumecheng-7594	116	17	that	that	SCONJ
fumecheng-7594	116	18	the	the	DET
fumecheng-7594	116	19	runner	runner	NOUN
fumecheng-7594	116	20	’s	’s	PART
fumecheng-7594	116	21	velocity	velocity	NOUN
fumecheng-7594	116	22	increases	increase	NOUN
fumecheng-7594	116	23	with	with	ADP
fumecheng-7594	116	24	rising	rise	VERB
fumecheng-7594	116	25	driving	drive	VERB
fumecheng-7594	116	26	frequencies	frequency	NOUN
fumecheng-7594	116	27	.	.	PUNCT
fumecheng-7594	117	1	when	when	SCONJ
fumecheng-7594	117	2	the	the	DET
fumecheng-7594	117	3	driving	drive	VERB
fumecheng-7594	117	4	frequency	frequency	NOUN
fumecheng-7594	117	5	reaches	reach	VERB
fumecheng-7594	117	6	to	to	ADP
fumecheng-7594	117	7	a	a	DET
fumecheng-7594	117	8	value	value	NOUN
fumecheng-7594	117	9	of	of	ADP
fumecheng-7594	117	10	26𝑘𝐻𝑧	26𝑘𝐻𝑧	PROPN
fumecheng-7594	117	11	,	,	PUNCT
fumecheng-7594	117	12	the	the	DET
fumecheng-7594	117	13	velocity	velocity	NOUN
fumecheng-7594	117	14	of	of	ADP
fumecheng-7594	117	15	the	the	DET
fumecheng-7594	117	16	runner	runner	NOUN
fumecheng-7594	117	17	is	be	AUX
fumecheng-7594	117	18	maximal	maximal	ADJ
fumecheng-7594	117	19	at	at	ADP
fumecheng-7594	117	20	a	a	DET
fumecheng-7594	117	21	value	value	NOUN
fumecheng-7594	117	22	of	of	ADP
fumecheng-7594	117	23	1.76	1.76	NUM
fumecheng-7594	117	24	𝑚𝑚/𝑠	𝑚𝑚/𝑠	NOUN
fumecheng-7594	117	25	with	with	ADP
fumecheng-7594	117	26	a	a	DET
fumecheng-7594	117	27	standard	standard	ADJ
fumecheng-7594	117	28	deviation	deviation	NOUN
fumecheng-7594	117	29	of	of	ADP
fumecheng-7594	117	30	7.4	7.4	NUM
fumecheng-7594	117	31	%	%	NOUN
fumecheng-7594	117	32	.	.	PUNCT
fumecheng-7594	118	1	if	if	SCONJ
fumecheng-7594	118	2	the	the	DET
fumecheng-7594	118	3	driving	drive	VERB
fumecheng-7594	118	4	frequency	frequency	NOUN
fumecheng-7594	118	5	continues	continue	VERB
fumecheng-7594	118	6	increasing	increase	VERB
fumecheng-7594	118	7	,	,	PUNCT
fumecheng-7594	118	8	the	the	DET
fumecheng-7594	118	9	velocity	velocity	NOUN
fumecheng-7594	118	10	decreases	decrease	VERB
fumecheng-7594	118	11	gradually	gradually	ADV
fumecheng-7594	118	12	.	.	PUNCT
fumecheng-7594	119	1	this	this	PRON
fumecheng-7594	119	2	can	can	AUX
fumecheng-7594	119	3	be	be	AUX
fumecheng-7594	119	4	explained	explain	VERB
fumecheng-7594	119	5	that	that	SCONJ
fumecheng-7594	119	6	,	,	PUNCT
fumecheng-7594	119	7	with	with	ADP
fumecheng-7594	119	8	driving	drive	VERB
fumecheng-7594	119	9	frequencies	frequency	NOUN
fumecheng-7594	119	10	higher	high	ADJ
fumecheng-7594	119	11	than	than	ADP
fumecheng-7594	119	12	a	a	DET
fumecheng-7594	119	13	maximal	maximal	ADJ
fumecheng-7594	119	14	-	-	PUNCT
fumecheng-7594	119	15	achievable	achievable	ADJ
fumecheng-7594	119	16	value	value	NOUN
fumecheng-7594	119	17	,	,	PUNCT
fumecheng-7594	119	18	after	after	SCONJ
fumecheng-7594	119	19	each	each	DET
fumecheng-7594	119	20	slip	slip	NOUN
fumecheng-7594	119	21	phase	phase	NOUN
fumecheng-7594	119	22	of	of	ADP
fumecheng-7594	119	23	the	the	DET
fumecheng-7594	119	24	runner	runner	NOUN
fumecheng-7594	119	25	,	,	PUNCT
fumecheng-7594	119	26	(	(	PUNCT
fumecheng-7594	119	27	a	a	X
fumecheng-7594	119	28	)	)	PUNCT
fumecheng-7594	119	29	(	(	PUNCT
fumecheng-7594	119	30	b	b	X
fumecheng-7594	119	31	)	)	PUNCT
fumecheng-7594	119	32	investigation	investigation	NOUN
fumecheng-7594	119	33	of	of	ADP
fumecheng-7594	119	34	influences	influence	NOUN
fumecheng-7594	119	35	of	of	ADP
fumecheng-7594	119	36	fabrication	fabrication	NOUN
fumecheng-7594	119	37	tolerances	tolerance	NOUN
fumecheng-7594	119	38	on	on	ADP
fumecheng-7594	119	39	operational	operational	ADJ
fumecheng-7594	119	40	characteristics	characteristic	NOUN
fumecheng-7594	119	41	of	of	ADP
fumecheng-7594	119	42	piezo	piezo	NOUN
fumecheng-7594	119	43	-	-	ADJ
fumecheng-7594	119	44	actuated	actuated	ADJ
fumecheng-7594	119	45	...	...	PUNCT
fumecheng-7594	119	46	115	115	NUM
fumecheng-7594	119	47	the	the	DET
fumecheng-7594	119	48	micro	micro	NOUN
fumecheng-7594	119	49	-	-	NOUN
fumecheng-7594	119	50	vibration	vibration	NOUN
fumecheng-7594	119	51	can	can	AUX
fumecheng-7594	119	52	not	not	PART
fumecheng-7594	119	53	be	be	AUX
fumecheng-7594	119	54	damped	damp	VERB
fumecheng-7594	119	55	before	before	SCONJ
fumecheng-7594	119	56	the	the	DET
fumecheng-7594	119	57	runner	runner	NOUN
fumecheng-7594	119	58	starts	start	VERB
fumecheng-7594	119	59	the	the	DET
fumecheng-7594	119	60	next	next	ADJ
fumecheng-7594	119	61	stick	stick	NOUN
fumecheng-7594	119	62	-	-	PUNCT
fumecheng-7594	119	63	phase	phase	NOUN
fumecheng-7594	119	64	.	.	PUNCT
fumecheng-7594	120	1	as	as	ADP
fumecheng-7594	120	2	a	a	DET
fumecheng-7594	120	3	result	result	NOUN
fumecheng-7594	120	4	,	,	PUNCT
fumecheng-7594	120	5	chaos	chaos	NOUN
fumecheng-7594	120	6	appears	appear	VERB
fumecheng-7594	120	7	which	which	PRON
fumecheng-7594	120	8	leads	lead	VERB
fumecheng-7594	120	9	to	to	ADP
fumecheng-7594	120	10	reductions	reduction	NOUN
fumecheng-7594	120	11	in	in	ADP
fumecheng-7594	120	12	the	the	DET
fumecheng-7594	120	13	runner	runner	NOUN
fumecheng-7594	120	14	’s	’s	PART
fumecheng-7594	120	15	velocity	velocity	NOUN
fumecheng-7594	120	16	.	.	PUNCT
fumecheng-7594	121	1	it	it	PRON
fumecheng-7594	121	2	is	be	AUX
fumecheng-7594	121	3	also	also	ADV
fumecheng-7594	121	4	seen	see	VERB
fumecheng-7594	121	5	that	that	SCONJ
fumecheng-7594	121	6	the	the	PRON
fumecheng-7594	121	7	higher	high	ADJ
fumecheng-7594	121	8	the	the	DET
fumecheng-7594	121	9	driving	drive	VERB
fumecheng-7594	121	10	frequency	frequency	NOUN
fumecheng-7594	121	11	is	be	AUX
fumecheng-7594	121	12	,	,	PUNCT
fumecheng-7594	121	13	the	the	PRON
fumecheng-7594	121	14	larger	large	ADJ
fumecheng-7594	121	15	the	the	DET
fumecheng-7594	121	16	error	error	NOUN
fumecheng-7594	121	17	bar	bar	NOUN
fumecheng-7594	121	18	is	be	AUX
fumecheng-7594	121	19	.	.	PUNCT
fumecheng-7594	122	1	the	the	DET
fumecheng-7594	122	2	repeatability	repeatability	NOUN
fumecheng-7594	122	3	of	of	ADP
fumecheng-7594	122	4	the	the	DET
fumecheng-7594	122	5	runner	runner	NOUN
fumecheng-7594	122	6	’s	’s	PART
fumecheng-7594	122	7	velocity	velocity	NOUN
fumecheng-7594	122	8	reduces	reduce	VERB
fumecheng-7594	122	9	with	with	ADP
fumecheng-7594	122	10	the	the	DET
fumecheng-7594	122	11	rising	rise	VERB
fumecheng-7594	122	12	driving	drive	VERB
fumecheng-7594	122	13	frequency	frequency	NOUN
fumecheng-7594	122	14	.	.	PUNCT
fumecheng-7594	123	1	fig	fig	NOUN
fumecheng-7594	123	2	.	.	PUNCT
fumecheng-7594	124	1	5	5	NUM
fumecheng-7594	124	2	the	the	DET
fumecheng-7594	124	3	repeatability	repeatability	NOUN
fumecheng-7594	124	4	of	of	ADP
fumecheng-7594	124	5	runner	runner	NOUN
fumecheng-7594	124	6	’s	’s	PART
fumecheng-7594	124	7	velocity	velocity	NOUN
fumecheng-7594	124	8	depending	depend	VERB
fumecheng-7594	124	9	on	on	ADP
fumecheng-7594	124	10	the	the	DET
fumecheng-7594	124	11	driving	drive	VERB
fumecheng-7594	124	12	frequency	frequency	NOUN
fumecheng-7594	124	13	with	with	ADP
fumecheng-7594	124	14	a	a	DET
fumecheng-7594	124	15	radius	radius	NOUN
fumecheng-7594	124	16	of	of	ADP
fumecheng-7594	124	17	the	the	DET
fumecheng-7594	124	18	ruby	ruby	PROPN
fumecheng-7594	124	19	hemispheres	hemisphere	NOUN
fumecheng-7594	124	20	𝑅	𝑅	PROPN
fumecheng-7594	124	21	=	=	PROPN
fumecheng-7594	124	22	0.5𝑚𝑚	0.5𝑚𝑚	PROPN
fumecheng-7594	124	23	and	and	CCONJ
fumecheng-7594	124	24	a	a	DET
fumecheng-7594	124	25	preload	preload	NOUN
fumecheng-7594	125	1	𝐹𝑝	𝐹𝑝	PROPN
fumecheng-7594	125	2	=	=	NOUN
fumecheng-7594	125	3	0.4𝑁	0.4𝑁	NOUN
fumecheng-7594	125	4	we	we	PRON
fumecheng-7594	125	5	come	come	VERB
fumecheng-7594	125	6	to	to	ADP
fumecheng-7594	125	7	the	the	DET
fumecheng-7594	125	8	following	follow	VERB
fumecheng-7594	125	9	comments	comment	NOUN
fumecheng-7594	125	10	:	:	PUNCT
fumecheng-7594	125	11	▪	▪	NOUN
fumecheng-7594	125	12	due	due	ADP
fumecheng-7594	125	13	to	to	ADP
fumecheng-7594	125	14	the	the	DET
fumecheng-7594	125	15	fabrication	fabrication	NOUN
fumecheng-7594	125	16	and	and	CCONJ
fumecheng-7594	125	17	assembly	assembly	NOUN
fumecheng-7594	125	18	tolerance	tolerance	NOUN
fumecheng-7594	125	19	of	of	ADP
fumecheng-7594	125	20	the	the	DET
fumecheng-7594	125	21	actuators	actuator	NOUN
fumecheng-7594	125	22	and	and	CCONJ
fumecheng-7594	125	23	the	the	DET
fumecheng-7594	125	24	runner	runner	NOUN
fumecheng-7594	125	25	,	,	PUNCT
fumecheng-7594	125	26	discrepancies	discrepancy	NOUN
fumecheng-7594	125	27	among	among	ADP
fumecheng-7594	125	28	actuators	actuator	NOUN
fumecheng-7594	125	29	appear	appear	VERB
fumecheng-7594	125	30	,	,	PUNCT
fumecheng-7594	125	31	including	include	VERB
fumecheng-7594	125	32	the	the	DET
fumecheng-7594	125	33	stiffness	stiffness	NOUN
fumecheng-7594	125	34	/	/	SYM
fumecheng-7594	125	35	damping	damp	VERB
fumecheng-7594	125	36	coefficients	coefficient	NOUN
fumecheng-7594	125	37	,	,	PUNCT
fumecheng-7594	125	38	the	the	DET
fumecheng-7594	125	39	actuation	actuation	NOUN
fumecheng-7594	125	40	amplitude	amplitude	NOUN
fumecheng-7594	125	41	,	,	PUNCT
fumecheng-7594	125	42	as	as	ADV
fumecheng-7594	125	43	well	well	ADV
fumecheng-7594	125	44	as	as	ADP
fumecheng-7594	125	45	the	the	DET
fumecheng-7594	125	46	normal	normal	ADJ
fumecheng-7594	125	47	force	force	NOUN
fumecheng-7594	125	48	of	of	ADP
fumecheng-7594	125	49	the	the	DET
fumecheng-7594	125	50	guiding	guide	VERB
fumecheng-7594	125	51	contacts	contact	NOUN
fumecheng-7594	125	52	.	.	PUNCT
fumecheng-7594	126	1	during	during	ADP
fumecheng-7594	126	2	the	the	DET
fumecheng-7594	126	3	operation	operation	NOUN
fumecheng-7594	126	4	,	,	PUNCT
fumecheng-7594	126	5	the	the	DET
fumecheng-7594	126	6	dynamic	dynamic	ADJ
fumecheng-7594	126	7	behavior	behavior	NOUN
fumecheng-7594	126	8	of	of	ADP
fumecheng-7594	126	9	an	an	DET
fumecheng-7594	126	10	individual	individual	ADJ
fumecheng-7594	126	11	actuator	actuator	NOUN
fumecheng-7594	126	12	and	and	CCONJ
fumecheng-7594	126	13	thus	thus	ADV
fumecheng-7594	126	14	the	the	DET
fumecheng-7594	126	15	contact	contact	NOUN
fumecheng-7594	126	16	force	force	NOUN
fumecheng-7594	126	17	are	be	AUX
fumecheng-7594	126	18	changed	change	VERB
fumecheng-7594	126	19	which	which	PRON
fumecheng-7594	126	20	influences	influence	VERB
fumecheng-7594	126	21	the	the	DET
fumecheng-7594	126	22	repeatability	repeatability	NOUN
fumecheng-7594	126	23	of	of	ADP
fumecheng-7594	126	24	the	the	DET
fumecheng-7594	126	25	overall	overall	ADJ
fumecheng-7594	126	26	movement	movement	NOUN
fumecheng-7594	126	27	of	of	ADP
fumecheng-7594	126	28	the	the	DET
fumecheng-7594	126	29	runner	runner	NOUN
fumecheng-7594	126	30	;	;	PUNCT
fumecheng-7594	126	31	▪	▪	NOUN
fumecheng-7594	126	32	the	the	DET
fumecheng-7594	126	33	impact	impact	NOUN
fumecheng-7594	126	34	of	of	ADP
fumecheng-7594	126	35	fabrication	fabrication	NOUN
fumecheng-7594	126	36	and	and	CCONJ
fumecheng-7594	126	37	assembly	assembly	NOUN
fumecheng-7594	126	38	tolerance	tolerance	NOUN
fumecheng-7594	126	39	on	on	ADP
fumecheng-7594	126	40	the	the	DET
fumecheng-7594	126	41	repeatability	repeatability	NOUN
fumecheng-7594	126	42	becomes	become	VERB
fumecheng-7594	126	43	larger	large	ADJ
fumecheng-7594	126	44	when	when	SCONJ
fumecheng-7594	126	45	the	the	DET
fumecheng-7594	126	46	size	size	NOUN
fumecheng-7594	126	47	of	of	ADP
fumecheng-7594	126	48	the	the	DET
fumecheng-7594	126	49	system	system	NOUN
fumecheng-7594	126	50	is	be	AUX
fumecheng-7594	126	51	decreased	decrease	VERB
fumecheng-7594	126	52	,	,	PUNCT
fumecheng-7594	126	53	and	and	CCONJ
fumecheng-7594	126	54	the	the	DET
fumecheng-7594	126	55	preload	preload	NOUN
fumecheng-7594	126	56	and	and	CCONJ
fumecheng-7594	126	57	the	the	DET
fumecheng-7594	126	58	driving	drive	VERB
fumecheng-7594	126	59	frequency	frequency	NOUN
fumecheng-7594	126	60	rise	rise	NOUN
fumecheng-7594	126	61	.	.	PUNCT
fumecheng-7594	127	1	3	3	X
fumecheng-7594	127	2	.	.	X
fumecheng-7594	127	3	modeling	modeling	NOUN
fumecheng-7594	127	4	and	and	CCONJ
fumecheng-7594	127	5	simulation	simulation	NOUN
fumecheng-7594	127	6	3.1	3.1	NUM
fumecheng-7594	127	7	.	.	PUNCT
fumecheng-7594	128	1	modeling	model	VERB
fumecheng-7594	128	2	the	the	DET
fumecheng-7594	128	3	concept	concept	NOUN
fumecheng-7594	128	4	of	of	ADP
fumecheng-7594	128	5	the	the	DET
fumecheng-7594	128	6	hybrid	hybrid	ADJ
fumecheng-7594	128	7	dynamic	dynamic	ADJ
fumecheng-7594	128	8	simulation	simulation	NOUN
fumecheng-7594	128	9	for	for	ADP
fumecheng-7594	128	10	passmds	passmds	NOUN
fumecheng-7594	128	11	was	be	AUX
fumecheng-7594	128	12	first	first	ADV
fumecheng-7594	128	13	proposed	propose	VERB
fumecheng-7594	128	14	in	in	ADP
fumecheng-7594	128	15	[	[	X
fumecheng-7594	128	16	18	18	NUM
fumecheng-7594	128	17	]	]	PUNCT
fumecheng-7594	128	18	and	and	CCONJ
fumecheng-7594	128	19	further	far	ADV
fumecheng-7594	128	20	validated	validate	VERB
fumecheng-7594	128	21	in	in	ADP
fumecheng-7594	128	22	[	[	X
fumecheng-7594	128	23	3	3	NUM
fumecheng-7594	128	24	,	,	PUNCT
fumecheng-7594	128	25	10	10	NUM
fumecheng-7594	128	26	,	,	PUNCT
fumecheng-7594	128	27	19	19	NUM
fumecheng-7594	128	28	,	,	PUNCT
fumecheng-7594	128	29	22	22	NUM
fumecheng-7594	128	30	]	]	PUNCT
fumecheng-7594	128	31	.	.	PUNCT
fumecheng-7594	129	1	the	the	DET
fumecheng-7594	129	2	basic	basic	ADJ
fumecheng-7594	129	3	idea	idea	NOUN
fumecheng-7594	129	4	of	of	ADP
fumecheng-7594	129	5	the	the	DET
fumecheng-7594	129	6	concept	concept	NOUN
fumecheng-7594	129	7	is	be	AUX
fumecheng-7594	129	8	the	the	DET
fumecheng-7594	129	9	combination	combination	NOUN
fumecheng-7594	129	10	of	of	ADP
fumecheng-7594	129	11	the	the	DET
fumecheng-7594	129	12	macroscopic	macroscopic	ADJ
fumecheng-7594	129	13	movement	movement	NOUN
fumecheng-7594	129	14	of	of	ADP
fumecheng-7594	129	15	the	the	DET
fumecheng-7594	129	16	runner	runner	NOUN
fumecheng-7594	129	17	and	and	CCONJ
fumecheng-7594	129	18	the	the	DET
fumecheng-7594	129	19	actuators	actuator	NOUN
fumecheng-7594	129	20	with	with	ADP
fumecheng-7594	129	21	the	the	DET
fumecheng-7594	129	22	microscopic	microscopic	ADJ
fumecheng-7594	129	23	behavior	behavior	NOUN
fumecheng-7594	129	24	of	of	ADP
fumecheng-7594	129	25	the	the	DET
fumecheng-7594	129	26	guiding	guide	VERB
fumecheng-7594	129	27	contacts	contact	NOUN
fumecheng-7594	129	28	using	use	VERB
fumecheng-7594	129	29	the	the	DET
fumecheng-7594	129	30	so	so	ADV
fumecheng-7594	129	31	-	-	PUNCT
fumecheng-7594	129	32	called	call	VERB
fumecheng-7594	129	33	method	method	NOUN
fumecheng-7594	129	34	of	of	ADP
fumecheng-7594	129	35	dimensionality	dimensionality	NOUN
fumecheng-7594	129	36	reduction	reduction	NOUN
fumecheng-7594	129	37	[	[	X
fumecheng-7594	129	38	17	17	NUM
fumecheng-7594	129	39	]	]	PUNCT
fumecheng-7594	129	40	.	.	PUNCT
fumecheng-7594	130	1	in	in	ADP
fumecheng-7594	130	2	these	these	DET
fumecheng-7594	130	3	works	work	NOUN
fumecheng-7594	130	4	,	,	PUNCT
fumecheng-7594	130	5	the	the	DET
fumecheng-7594	130	6	authors	author	NOUN
fumecheng-7594	130	7	modeled	model	VERB
fumecheng-7594	130	8	the	the	DET
fumecheng-7594	130	9	actuators	actuator	NOUN
fumecheng-7594	130	10	as	as	ADP
fumecheng-7594	130	11	ideally	ideally	ADV
fumecheng-7594	130	12	rigid	rigid	ADJ
fumecheng-7594	130	13	.	.	PUNCT
fumecheng-7594	131	1	the	the	DET
fumecheng-7594	131	2	dynamic	dynamic	ADJ
fumecheng-7594	131	3	behavior	behavior	NOUN
fumecheng-7594	131	4	of	of	ADP
fumecheng-7594	131	5	the	the	DET
fumecheng-7594	131	6	actuators	actuator	NOUN
fumecheng-7594	131	7	was	be	AUX
fumecheng-7594	131	8	not	not	PART
fumecheng-7594	131	9	considered	consider	VERB
fumecheng-7594	131	10	.	.	PUNCT
fumecheng-7594	132	1	recently	recently	ADV
fumecheng-7594	132	2	,	,	PUNCT
fumecheng-7594	132	3	in	in	ADP
fumecheng-7594	132	4	[	[	X
fumecheng-7594	132	5	20	20	NUM
fumecheng-7594	132	6	]	]	PUNCT
fumecheng-7594	132	7	,	,	PUNCT
fumecheng-7594	132	8	the	the	DET
fumecheng-7594	132	9	authors	author	NOUN
fumecheng-7594	132	10	extended	extend	VERB
fumecheng-7594	132	11	the	the	DET
fumecheng-7594	132	12	model	model	NOUN
fumecheng-7594	132	13	so	so	SCONJ
fumecheng-7594	132	14	that	that	SCONJ
fumecheng-7594	132	15	the	the	DET
fumecheng-7594	132	16	actuators	actuator	NOUN
fumecheng-7594	132	17	are	be	AUX
fumecheng-7594	132	18	considered	consider	VERB
fumecheng-7594	132	19	as	as	ADP
fumecheng-7594	132	20	mass	mass	ADJ
fumecheng-7594	132	21	-	-	PUNCT
fumecheng-7594	132	22	spring	spring	NOUN
fumecheng-7594	132	23	-	-	PUNCT
fumecheng-7594	132	24	damper	damper	NOUN
fumecheng-7594	132	25	systems	system	NOUN
fumecheng-7594	132	26	.	.	PUNCT
fumecheng-7594	133	1	however	however	ADV
fumecheng-7594	133	2	,	,	PUNCT
fumecheng-7594	133	3	all	all	DET
fumecheng-7594	133	4	these	these	DET
fumecheng-7594	133	5	works	work	NOUN
fumecheng-7594	133	6	assume	assume	VERB
fumecheng-7594	133	7	that	that	SCONJ
fumecheng-7594	133	8	the	the	DET
fumecheng-7594	133	9	fabrication	fabrication	NOUN
fumecheng-7594	133	10	and	and	CCONJ
fumecheng-7594	133	11	assembly	assembly	NOUN
fumecheng-7594	133	12	tolerance	tolerance	NOUN
fumecheng-7594	133	13	do	do	AUX
fumecheng-7594	133	14	not	not	PART
fumecheng-7594	133	15	influence	influence	VERB
fumecheng-7594	133	16	the	the	DET
fumecheng-7594	133	17	characteristics	characteristic	NOUN
fumecheng-7594	133	18	of	of	ADP
fumecheng-7594	133	19	the	the	DET
fumecheng-7594	133	20	drive	drive	NOUN
fumecheng-7594	133	21	.	.	PUNCT
fumecheng-7594	134	1	therefore	therefore	ADV
fumecheng-7594	134	2	,	,	PUNCT
fumecheng-7594	134	3	discrepancies	discrepancy	NOUN
fumecheng-7594	134	4	in	in	ADP
fumecheng-7594	134	5	the	the	DET
fumecheng-7594	134	6	actuators	actuator	NOUN
fumecheng-7594	134	7	'	'	PART
fumecheng-7594	134	8	dynamic	dynamic	ADJ
fumecheng-7594	134	9	behavior	behavior	NOUN
fumecheng-7594	134	10	and	and	CCONJ
fumecheng-7594	134	11	actuation	actuation	NOUN
fumecheng-7594	134	12	amplitude	amplitude	NOUN
fumecheng-7594	134	13	and	and	CCONJ
fumecheng-7594	134	14	the	the	DET
fumecheng-7594	134	15	contact	contact	NOUN
fumecheng-7594	134	16	forces	force	NOUN
fumecheng-7594	134	17	were	be	AUX
fumecheng-7594	134	18	not	not	PART
fumecheng-7594	134	19	modeled	model	VERB
fumecheng-7594	134	20	.	.	PUNCT
fumecheng-7594	135	1	in	in	ADP
fumecheng-7594	135	2	this	this	DET
fumecheng-7594	135	3	work	work	NOUN
fumecheng-7594	135	4	,	,	PUNCT
fumecheng-7594	135	5	we	we	PRON
fumecheng-7594	135	6	continue	continue	VERB
fumecheng-7594	135	7	extending	extend	VERB
fumecheng-7594	135	8	the	the	DET
fumecheng-7594	135	9	model	model	NOUN
fumecheng-7594	135	10	proposed	propose	VERB
fumecheng-7594	135	11	in	in	ADP
fumecheng-7594	135	12	[	[	X
fumecheng-7594	135	13	20	20	NUM
fumecheng-7594	135	14	]	]	PUNCT
fumecheng-7594	135	15	so	so	SCONJ
fumecheng-7594	135	16	that	that	SCONJ
fumecheng-7594	135	17	the	the	DET
fumecheng-7594	135	18	discrepancies	discrepancy	NOUN
fumecheng-7594	135	19	caused	cause	VERB
fumecheng-7594	135	20	by	by	ADP
fumecheng-7594	135	21	the	the	DET
fumecheng-7594	135	22	fabrication	fabrication	NOUN
fumecheng-7594	135	23	and	and	CCONJ
fumecheng-7594	135	24	assembly	assembly	NOUN
fumecheng-7594	135	25	tolerance	tolerance	NOUN
fumecheng-7594	135	26	are	be	AUX
fumecheng-7594	135	27	considered	consider	VERB
fumecheng-7594	135	28	.	.	PUNCT
fumecheng-7594	136	1	the	the	DET
fumecheng-7594	136	2	extended	extended	ADJ
fumecheng-7594	136	3	macroscopic	macroscopic	ADJ
fumecheng-7594	136	4	model	model	NOUN
fumecheng-7594	136	5	to	to	PART
fumecheng-7594	136	6	describe	describe	VERB
fumecheng-7594	136	7	the	the	DET
fumecheng-7594	136	8	investigated	investigate	VERB
fumecheng-7594	136	9	drive	drive	NOUN
fumecheng-7594	136	10	's	's	PART
fumecheng-7594	136	11	overall	overall	ADJ
fumecheng-7594	136	12	movement	movement	NOUN
fumecheng-7594	136	13	is	be	AUX
fumecheng-7594	136	14	presented	present	VERB
fumecheng-7594	136	15	in	in	ADP
fumecheng-7594	136	16	fig	fig	NOUN
fumecheng-7594	136	17	.	.	PUNCT
fumecheng-7594	137	1	6	6	NUM
fumecheng-7594	137	2	where	where	SCONJ
fumecheng-7594	137	3	a	a	DET
fumecheng-7594	137	4	free	free	ADJ
fumecheng-7594	137	5	-	-	PUNCT
fumecheng-7594	137	6	body	body	NOUN
fumecheng-7594	137	7	diagram	diagram	NOUN
fumecheng-7594	137	8	is	be	AUX
fumecheng-7594	137	9	drawn	draw	VERB
fumecheng-7594	137	10	.	.	PUNCT
fumecheng-7594	138	1	the	the	DET
fumecheng-7594	138	2	runner	runner	NOUN
fumecheng-7594	138	3	has	have	VERB
fumecheng-7594	138	4	a	a	DET
fumecheng-7594	138	5	mass	mass	NOUN
fumecheng-7594	138	6	of	of	ADP
fumecheng-7594	138	7	𝑚𝑟	𝑚𝑟	PROPN
fumecheng-7594	138	8	116	116	NUM
fumecheng-7594	138	9	h.	h.	PROPN
fumecheng-7594	138	10	x.	x.	PROPN
fumecheng-7594	138	11	nguyen	nguyen	PROPN
fumecheng-7594	138	12	,	,	PUNCT
fumecheng-7594	138	13	a.	a.	PROPN
fumecheng-7594	138	14	h.	h.	PROPN
fumecheng-7594	138	15	nguyen	nguyen	PROPN
fumecheng-7594	138	16	whose	whose	DET
fumecheng-7594	138	17	movements	movement	NOUN
fumecheng-7594	138	18	in	in	ADP
fumecheng-7594	138	19	the	the	DET
fumecheng-7594	138	20	horizontal	horizontal	ADJ
fumecheng-7594	138	21	direction	direction	NOUN
fumecheng-7594	138	22	are	be	AUX
fumecheng-7594	138	23	described	describe	VERB
fumecheng-7594	138	24	by	by	ADP
fumecheng-7594	138	25	the	the	DET
fumecheng-7594	138	26	coordinate	coordinate	NOUN
fumecheng-7594	138	27	𝑥𝑟	𝑥𝑟	PRON
fumecheng-7594	138	28	under	under	ADP
fumecheng-7594	138	29	the	the	DET
fumecheng-7594	138	30	acting	acting	NOUN
fumecheng-7594	138	31	of	of	ADP
fumecheng-7594	138	32	the	the	DET
fumecheng-7594	138	33	normal	normal	ADJ
fumecheng-7594	138	34	and	and	CCONJ
fumecheng-7594	138	35	friction	friction	NOUN
fumecheng-7594	138	36	forces	force	NOUN
fumecheng-7594	138	37	of	of	ADP
fumecheng-7594	138	38	the	the	DET
fumecheng-7594	138	39	guiding	guide	VERB
fumecheng-7594	138	40	contacts	contact	NOUN
fumecheng-7594	138	41	.	.	PUNCT
fumecheng-7594	139	1	in	in	ADP
fumecheng-7594	139	2	fig	fig	NOUN
fumecheng-7594	139	3	.	.	PUNCT
fumecheng-7594	140	1	6a	6a	NOUN
fumecheng-7594	140	2	,	,	PUNCT
fumecheng-7594	140	3	three	three	NUM
fumecheng-7594	140	4	massspring	massspre	VERB
fumecheng-7594	140	5	-	-	PUNCT
fumecheng-7594	140	6	damper	damper	NOUN
fumecheng-7594	140	7	systems	system	NOUN
fumecheng-7594	140	8	of	of	ADP
fumecheng-7594	140	9	actuators	actuator	NOUN
fumecheng-7594	140	10	are	be	AUX
fumecheng-7594	140	11	drawn	draw	VERB
fumecheng-7594	140	12	where	where	SCONJ
fumecheng-7594	140	13	each	each	DET
fumecheng-7594	140	14	system	system	NOUN
fumecheng-7594	140	15	is	be	AUX
fumecheng-7594	140	16	depicted	depict	VERB
fumecheng-7594	140	17	for	for	ADP
fumecheng-7594	140	18	two	two	NUM
fumecheng-7594	140	19	actuators	actuator	NOUN
fumecheng-7594	140	20	(	(	PUNCT
fumecheng-7594	140	21	two	two	NUM
fumecheng-7594	140	22	at	at	ADP
fumecheng-7594	140	23	the	the	DET
fumecheng-7594	140	24	top	top	NOUN
fumecheng-7594	140	25	and	and	CCONJ
fumecheng-7594	140	26	four	four	NUM
fumecheng-7594	140	27	at	at	ADP
fumecheng-7594	140	28	the	the	DET
fumecheng-7594	140	29	button	button	NOUN
fumecheng-7594	140	30	)	)	PUNCT
fumecheng-7594	140	31	.	.	PUNCT
fumecheng-7594	141	1	unlike	unlike	ADP
fumecheng-7594	141	2	previously	previously	ADV
fumecheng-7594	141	3	published	publish	VERB
fumecheng-7594	141	4	work	work	NOUN
fumecheng-7594	141	5	[	[	X
fumecheng-7594	141	6	20	20	NUM
fumecheng-7594	141	7	]	]	PUNCT
fumecheng-7594	141	8	,	,	PUNCT
fumecheng-7594	141	9	in	in	ADP
fumecheng-7594	141	10	this	this	DET
fumecheng-7594	141	11	work	work	NOUN
fumecheng-7594	141	12	,	,	PUNCT
fumecheng-7594	141	13	due	due	ADP
fumecheng-7594	141	14	to	to	ADP
fumecheng-7594	141	15	the	the	DET
fumecheng-7594	141	16	fabrication	fabrication	NOUN
fumecheng-7594	141	17	and	and	CCONJ
fumecheng-7594	141	18	assembly	assembly	NOUN
fumecheng-7594	141	19	tolerance	tolerance	NOUN
fumecheng-7594	141	20	,	,	PUNCT
fumecheng-7594	141	21	dynamic	dynamic	ADJ
fumecheng-7594	141	22	parameters	parameter	NOUN
fumecheng-7594	141	23	of	of	ADP
fumecheng-7594	141	24	the	the	DET
fumecheng-7594	141	25	actuators	actuator	NOUN
fumecheng-7594	141	26	as	as	ADV
fumecheng-7594	141	27	well	well	ADV
fumecheng-7594	141	28	as	as	ADP
fumecheng-7594	141	29	the	the	DET
fumecheng-7594	141	30	contacting	contact	VERB
fumecheng-7594	141	31	forces	force	NOUN
fumecheng-7594	141	32	are	be	AUX
fumecheng-7594	141	33	not	not	PART
fumecheng-7594	141	34	identical	identical	ADJ
fumecheng-7594	141	35	.	.	PUNCT
fumecheng-7594	142	1	therefore	therefore	ADV
fumecheng-7594	142	2	,	,	PUNCT
fumecheng-7594	142	3	each	each	DET
fumecheng-7594	142	4	actuator	actuator	NOUN
fumecheng-7594	142	5	is	be	AUX
fumecheng-7594	142	6	modeled	model	VERB
fumecheng-7594	142	7	by	by	ADP
fumecheng-7594	142	8	a	a	DET
fumecheng-7594	142	9	mass	mass	ADJ
fumecheng-7594	142	10	𝑚𝑎𝑖	𝑚𝑎𝑖	NOUN
fumecheng-7594	142	11	,	,	PUNCT
fumecheng-7594	142	12	a	a	DET
fumecheng-7594	142	13	stiffness	stiffness	NOUN
fumecheng-7594	142	14	𝑘𝑝𝑖	𝑘𝑝𝑖	NOUN
fumecheng-7594	142	15	and	and	CCONJ
fumecheng-7594	142	16	a	a	DET
fumecheng-7594	142	17	damping	damp	VERB
fumecheng-7594	142	18	𝑐𝑝𝑖.	𝑐𝑝𝑖.	NOUN
fumecheng-7594	142	19	displacements	displacement	NOUN
fumecheng-7594	142	20	of	of	ADP
fumecheng-7594	142	21	the	the	DET
fumecheng-7594	142	22	actuators	actuator	NOUN
fumecheng-7594	142	23	are	be	AUX
fumecheng-7594	142	24	described	describe	VERB
fumecheng-7594	142	25	by	by	ADP
fumecheng-7594	142	26	𝑥𝑎𝑖	𝑥𝑎𝑖	NOUN
fumecheng-7594	142	27	.	.	PUNCT
fumecheng-7594	143	1	the	the	DET
fumecheng-7594	143	2	deformation	deformation	NOUN
fumecheng-7594	143	3	of	of	ADP
fumecheng-7594	143	4	the	the	DET
fumecheng-7594	143	5	piezo	piezo	PROPN
fumecheng-7594	143	6	elements	element	NOUN
fumecheng-7594	143	7	is	be	AUX
fumecheng-7594	143	8	𝑥𝑝𝑖	𝑥𝑝𝑖	ADP
fumecheng-7594	143	9	has	have	VERB
fumecheng-7594	143	10	a	a	DET
fumecheng-7594	143	11	form	form	NOUN
fumecheng-7594	143	12	of	of	ADP
fumecheng-7594	143	13	saw	saw	NOUN
fumecheng-7594	143	14	-	-	PUNCT
fumecheng-7594	143	15	tooth	tooth	NOUN
fumecheng-7594	143	16	like	like	ADP
fumecheng-7594	143	17	as	as	SCONJ
fumecheng-7594	143	18	shown	show	VERB
fumecheng-7594	143	19	in	in	ADP
fumecheng-7594	143	20	fig	fig	NOUN
fumecheng-7594	143	21	.	.	PUNCT
fumecheng-7594	144	1	6c	6c	NOUN
fumecheng-7594	144	2	.	.	PUNCT
fumecheng-7594	145	1	for	for	ADP
fumecheng-7594	145	2	each	each	DET
fumecheng-7594	145	3	contact	contact	NOUN
fumecheng-7594	145	4	,	,	PUNCT
fumecheng-7594	145	5	the	the	DET
fumecheng-7594	145	6	normal	normal	ADJ
fumecheng-7594	145	7	and	and	CCONJ
fumecheng-7594	145	8	friction	friction	NOUN
fumecheng-7594	145	9	force	force	NOUN
fumecheng-7594	145	10	are	be	AUX
fumecheng-7594	145	11	presented	present	VERB
fumecheng-7594	145	12	by	by	ADP
fumecheng-7594	145	13	𝐹𝑁𝑖	𝐹𝑁𝑖	ADV
fumecheng-7594	145	14	,	,	PUNCT
fumecheng-7594	145	15	and	and	CCONJ
fumecheng-7594	145	16	𝐹𝑓𝑖	𝐹𝑓𝑖	NOUN
fumecheng-7594	145	17	(	(	PUNCT
fumecheng-7594	145	18	𝑖	𝑖	NOUN
fumecheng-7594	145	19	=	=	SYM
fumecheng-7594	145	20	1	1	NUM
fumecheng-7594	145	21	÷	÷	NUM
fumecheng-7594	145	22	6	6	NUM
fumecheng-7594	145	23	)	)	PUNCT
fumecheng-7594	145	24	,	,	PUNCT
fumecheng-7594	145	25	respectively	respectively	ADV
fumecheng-7594	145	26	.	.	PUNCT
fumecheng-7594	146	1	the	the	DET
fumecheng-7594	146	2	stiffness	stiffness	NOUN
fumecheng-7594	146	3	of	of	ADP
fumecheng-7594	146	4	the	the	DET
fumecheng-7594	146	5	load	load	NOUN
fumecheng-7594	146	6	cell	cell	NOUN
fumecheng-7594	146	7	is	be	AUX
fumecheng-7594	146	8	presented	present	VERB
fumecheng-7594	146	9	by	by	ADP
fumecheng-7594	146	10	𝑘.	𝑘.	PROPN
fumecheng-7594	146	11	fig	fig	PROPN
fumecheng-7594	146	12	.	.	PUNCT
fumecheng-7594	147	1	6	6	NUM
fumecheng-7594	147	2	macroscopic	macroscopic	ADJ
fumecheng-7594	147	3	modeling	modeling	NOUN
fumecheng-7594	147	4	for	for	ADP
fumecheng-7594	147	5	the	the	DET
fumecheng-7594	147	6	investigated	investigate	VERB
fumecheng-7594	147	7	drive	drive	NOUN
fumecheng-7594	147	8	macroscopic	macroscopic	ADJ
fumecheng-7594	147	9	movements	movement	NOUN
fumecheng-7594	147	10	of	of	ADP
fumecheng-7594	147	11	the	the	DET
fumecheng-7594	147	12	runner	runner	NOUN
fumecheng-7594	147	13	and	and	CCONJ
fumecheng-7594	147	14	the	the	DET
fumecheng-7594	147	15	actuators	actuator	NOUN
fumecheng-7594	147	16	are	be	AUX
fumecheng-7594	147	17	formulated	formulate	VERB
fumecheng-7594	147	18	via	via	ADP
fumecheng-7594	147	19	the	the	DET
fumecheng-7594	147	20	newtonian	newtonian	ADJ
fumecheng-7594	147	21	mechanics	mechanic	NOUN
fumecheng-7594	147	22	,	,	PUNCT
fumecheng-7594	147	23	in	in	ADP
fumecheng-7594	147	24	which	which	PRON
fumecheng-7594	147	25	eq	eq	NOUN
fumecheng-7594	147	26	.	.	NOUN
fumecheng-7594	147	27	1	1	NUM
fumecheng-7594	147	28	for	for	ADP
fumecheng-7594	147	29	the	the	DET
fumecheng-7594	147	30	runner	runner	NOUN
fumecheng-7594	147	31	and	and	CCONJ
fumecheng-7594	147	32	eq	eq	NOUN
fumecheng-7594	147	33	.	.	PROPN
fumecheng-7594	147	34	2	2	NUM
fumecheng-7594	147	35	for	for	ADP
fumecheng-7594	147	36	the	the	DET
fumecheng-7594	147	37	actuators	actuator	NOUN
fumecheng-7594	147	38	.	.	PUNCT
fumecheng-7594	148	1	it	it	PRON
fumecheng-7594	148	2	is	be	AUX
fumecheng-7594	148	3	noticed	notice	VERB
fumecheng-7594	148	4	that	that	SCONJ
fumecheng-7594	148	5	the	the	DET
fumecheng-7594	148	6	influence	influence	NOUN
fumecheng-7594	148	7	of	of	ADP
fumecheng-7594	148	8	the	the	DET
fumecheng-7594	148	9	gravity	gravity	NOUN
fumecheng-7594	148	10	force	force	NOUN
fumecheng-7594	148	11	is	be	AUX
fumecheng-7594	148	12	neglected	neglect	VERB
fumecheng-7594	148	13	[	[	X
fumecheng-7594	148	14	10	10	NUM
fumecheng-7594	148	15	]	]	PUNCT
fumecheng-7594	148	16	.	.	PUNCT
fumecheng-7594	149	1	the	the	DET
fumecheng-7594	149	2	friction	friction	NOUN
fumecheng-7594	149	3	forces	force	NOUN
fumecheng-7594	149	4	𝐹𝑓𝑖	𝐹𝑓𝑖	PROPN
fumecheng-7594	149	5	in	in	ADP
fumecheng-7594	149	6	eqs	eqs	PROPN
fumecheng-7594	149	7	.	.	PUNCT
fumecheng-7594	150	1	(	(	PUNCT
fumecheng-7594	150	2	1	1	X
fumecheng-7594	150	3	)	)	PUNCT
fumecheng-7594	150	4	and	and	CCONJ
fumecheng-7594	150	5	(	(	PUNCT
fumecheng-7594	150	6	2	2	X
fumecheng-7594	150	7	)	)	PUNCT
fumecheng-7594	150	8	are	be	AUX
fumecheng-7594	150	9	modelled	model	VERB
fumecheng-7594	150	10	by	by	ADP
fumecheng-7594	150	11	a	a	DET
fumecheng-7594	150	12	microscopic	microscopic	ADJ
fumecheng-7594	150	13	model	model	NOUN
fumecheng-7594	150	14	using	use	VERB
fumecheng-7594	150	15	mdr	mdr	PROPN
fumecheng-7594	150	16	[	[	X
fumecheng-7594	150	17	17	17	NUM
fumecheng-7594	150	18	]	]	PUNCT
fumecheng-7594	150	19	which	which	PRON
fumecheng-7594	150	20	depends	depend	VERB
fumecheng-7594	150	21	directly	directly	ADV
fumecheng-7594	150	22	on	on	ADP
fumecheng-7594	150	23	the	the	DET
fumecheng-7594	150	24	contact	contact	NOUN
fumecheng-7594	150	25	mechanics	mechanic	NOUN
fumecheng-7594	150	26	and	and	CCONJ
fumecheng-7594	150	27	the	the	DET
fumecheng-7594	150	28	normal	normal	ADJ
fumecheng-7594	150	29	forces	force	NOUN
fumecheng-7594	150	30	.	.	PUNCT
fumecheng-7594	151	1	since	since	SCONJ
fumecheng-7594	151	2	the	the	DET
fumecheng-7594	151	3	fabrication	fabrication	NOUN
fumecheng-7594	151	4	and	and	CCONJ
fumecheng-7594	151	5	assembly	assembly	NOUN
fumecheng-7594	151	6	tolerance	tolerance	NOUN
fumecheng-7594	151	7	is	be	AUX
fumecheng-7594	151	8	considered	consider	VERB
fumecheng-7594	151	9	,	,	PUNCT
fumecheng-7594	151	10	the	the	DET
fumecheng-7594	151	11	modeling	modeling	NOUN
fumecheng-7594	151	12	of	of	ADP
fumecheng-7594	151	13	them	they	PRON
fumecheng-7594	151	14	is	be	AUX
fumecheng-7594	151	15	additionally	additionally	ADV
fumecheng-7594	151	16	be	be	AUX
fumecheng-7594	151	17	implemented	implement	VERB
fumecheng-7594	151	18	.	.	PUNCT
fumecheng-7594	152	1	6	6	NUM
fumecheng-7594	152	2	1	1	NUM
fumecheng-7594	152	3	r	r	NOUN
fumecheng-7594	152	4	r	r	NOUN
fumecheng-7594	152	5	r	r	NOUN
fumecheng-7594	152	6	fi	fi	NOUN
fumecheng-7594	152	7	i	i	PRON
fumecheng-7594	152	8	m	m	VERB
fumecheng-7594	152	9	x	x	VERB
fumecheng-7594	152	10	kx	kx	PROPN
fumecheng-7594	152	11	f	f	PROPN
fumecheng-7594	153	1	=	=	PUNCT
fumecheng-7594	153	2	=	=	PUNCT
fumecheng-7594	154	1	−	−	PROPN
fumecheng-7594	154	2	+	+	NOUN
fumecheng-7594	154	3			X
fumecheng-7594	154	4	(	(	PUNCT
fumecheng-7594	154	5	1	1	NUM
fumecheng-7594	154	6	)	)	PUNCT
fumecheng-7594	154	7	(	(	PUNCT
fumecheng-7594	154	8	)	)	PUNCT
fumecheng-7594	154	9	(	(	PUNCT
fumecheng-7594	154	10	1	1	NUM
fumecheng-7594	154	11	6)ai	6)ai	NOUN
fumecheng-7594	154	12	ai	ai	VERB
fumecheng-7594	154	13	pi	pi	NOUN
fumecheng-7594	154	14	pi	pi	NOUN
fumecheng-7594	154	15	ai	ai	VERB
fumecheng-7594	154	16	pi	pi	NOUN
fumecheng-7594	154	17	ai	ai	INTJ
fumecheng-7594	154	18	fim	fim	INTJ
fumecheng-7594	154	19	x	x	SYM
fumecheng-7594	154	20	k	k	NOUN
fumecheng-7594	154	21	x	x	PUNCT
fumecheng-7594	155	1	x	x	X
fumecheng-7594	155	2	c	c	NOUN
fumecheng-7594	155	3	x	x	X
fumecheng-7594	155	4	f	f	X
fumecheng-7594	155	5	i=	i=	ADV
fumecheng-7594	156	1	−	−	PROPN
fumecheng-7594	156	2	−	−	NOUN
fumecheng-7594	157	1	−	−	PROPN
fumecheng-7594	157	2	=	=	SYM
fumecheng-7594	157	3			PROPN
fumecheng-7594	157	4	(	(	PUNCT
fumecheng-7594	157	5	2	2	NUM
fumecheng-7594	157	6	)	)	PUNCT
fumecheng-7594	157	7	variations	variation	NOUN
fumecheng-7594	157	8	of	of	ADP
fumecheng-7594	157	9	the	the	DET
fumecheng-7594	157	10	actuation	actuation	NOUN
fumecheng-7594	157	11	amplitude	amplitude	NOUN
fumecheng-7594	157	12	of	of	ADP
fumecheng-7594	157	13	the	the	DET
fumecheng-7594	157	14	contact	contact	NOUN
fumecheng-7594	157	15	points	point	NOUN
fumecheng-7594	157	16	and	and	CCONJ
fumecheng-7594	157	17	the	the	DET
fumecheng-7594	157	18	normal	normal	ADJ
fumecheng-7594	157	19	force	force	NOUN
fumecheng-7594	157	20	applied	apply	VERB
fumecheng-7594	157	21	on	on	ADP
fumecheng-7594	157	22	each	each	DET
fumecheng-7594	157	23	contact	contact	NOUN
fumecheng-7594	157	24	,	,	PUNCT
fumecheng-7594	157	25	caused	cause	VERB
fumecheng-7594	157	26	by	by	ADP
fumecheng-7594	157	27	the	the	DET
fumecheng-7594	157	28	fabrication	fabrication	NOUN
fumecheng-7594	157	29	and	and	CCONJ
fumecheng-7594	157	30	assembly	assembly	NOUN
fumecheng-7594	157	31	tolerance	tolerance	NOUN
fumecheng-7594	157	32	,	,	PUNCT
fumecheng-7594	157	33	are	be	AUX
fumecheng-7594	157	34	modeled	model	VERB
fumecheng-7594	157	35	as	as	ADP
fumecheng-7594	157	36	in	in	ADP
fumecheng-7594	157	37	fig	fig	NOUN
fumecheng-7594	157	38	.	.	PUNCT
fumecheng-7594	158	1	7	7	X
fumecheng-7594	158	2	.	.	X
fumecheng-7594	158	3	investigation	investigation	NOUN
fumecheng-7594	158	4	of	of	ADP
fumecheng-7594	158	5	influences	influence	NOUN
fumecheng-7594	158	6	of	of	ADP
fumecheng-7594	158	7	fabrication	fabrication	NOUN
fumecheng-7594	158	8	tolerances	tolerance	NOUN
fumecheng-7594	158	9	on	on	ADP
fumecheng-7594	158	10	operational	operational	ADJ
fumecheng-7594	158	11	characteristics	characteristic	NOUN
fumecheng-7594	158	12	of	of	ADP
fumecheng-7594	158	13	piezo	piezo	NOUN
fumecheng-7594	158	14	-	-	ADJ
fumecheng-7594	158	15	actuated	actuated	ADJ
fumecheng-7594	158	16	...	...	PUNCT
fumecheng-7594	158	17	117	117	NUM
fumecheng-7594	158	18	•	•	NOUN
fumecheng-7594	158	19	firstly	firstly	ADV
fumecheng-7594	158	20	,	,	PUNCT
fumecheng-7594	158	21	the	the	DET
fumecheng-7594	158	22	fabrication	fabrication	NOUN
fumecheng-7594	158	23	and	and	CCONJ
fumecheng-7594	158	24	assembly	assembly	NOUN
fumecheng-7594	158	25	error	error	NOUN
fumecheng-7594	158	26	of	of	ADP
fumecheng-7594	158	27	the	the	DET
fumecheng-7594	158	28	actuator	actuator	NOUN
fumecheng-7594	158	29	blocks	block	NOUN
fumecheng-7594	158	30	are	be	AUX
fumecheng-7594	158	31	modeled	model	VERB
fumecheng-7594	158	32	in	in	ADP
fumecheng-7594	158	33	figs	fig	NOUN
fumecheng-7594	158	34	.	.	PUNCT
fumecheng-7594	159	1	7a	7a	NOUN
fumecheng-7594	159	2	and	and	CCONJ
fumecheng-7594	159	3	7c	7c	PROPN
fumecheng-7594	159	4	.	.	PUNCT
fumecheng-7594	159	5	fig	fig	NOUN
fumecheng-7594	159	6	.	.	PUNCT
fumecheng-7594	160	1	7a	7a	NUM
fumecheng-7594	160	2	depicts	depict	VERB
fumecheng-7594	160	3	the	the	DET
fumecheng-7594	160	4	ideal	ideal	ADJ
fumecheng-7594	160	5	case	case	NOUN
fumecheng-7594	160	6	when	when	SCONJ
fumecheng-7594	160	7	the	the	DET
fumecheng-7594	160	8	actuator	actuator	NOUN
fumecheng-7594	160	9	blocks	block	NOUN
fumecheng-7594	160	10	are	be	AUX
fumecheng-7594	160	11	aligned	align	VERB
fumecheng-7594	160	12	together	together	ADV
fumecheng-7594	160	13	with	with	ADP
fumecheng-7594	160	14	an	an	DET
fumecheng-7594	160	15	angle	angle	NOUN
fumecheng-7594	160	16	90	90	NUM
fumecheng-7594	160	17	°	°	NOUN
fumecheng-7594	160	18	(	(	PUNCT
fumecheng-7594	160	19	the	the	DET
fumecheng-7594	160	20	continuous	continuous	ADJ
fumecheng-7594	160	21	,	,	PUNCT
fumecheng-7594	160	22	black	black	ADJ
fumecheng-7594	160	23	line	line	NOUN
fumecheng-7594	160	24	)	)	PUNCT
fumecheng-7594	160	25	and	and	CCONJ
fumecheng-7594	160	26	the	the	DET
fumecheng-7594	160	27	manufactured	manufacture	VERB
fumecheng-7594	160	28	case	case	NOUN
fumecheng-7594	160	29	.	.	PUNCT
fumecheng-7594	161	1	the	the	DET
fumecheng-7594	161	2	fabrication	fabrication	NOUN
fumecheng-7594	161	3	and	and	CCONJ
fumecheng-7594	161	4	assembly	assembly	NOUN
fumecheng-7594	161	5	tolerance	tolerance	NOUN
fumecheng-7594	161	6	are	be	AUX
fumecheng-7594	161	7	considered	consider	VERB
fumecheng-7594	161	8	(	(	PUNCT
fumecheng-7594	161	9	the	the	DET
fumecheng-7594	161	10	dashed	dash	VERB
fumecheng-7594	161	11	,	,	PUNCT
fumecheng-7594	161	12	red	red	ADJ
fumecheng-7594	161	13	line	line	NOUN
fumecheng-7594	161	14	)	)	PUNCT
fumecheng-7594	161	15	where	where	SCONJ
fumecheng-7594	161	16	the	the	DET
fumecheng-7594	161	17	alignment	alignment	NOUN
fumecheng-7594	161	18	angle	angle	NOUN
fumecheng-7594	161	19	is	be	AUX
fumecheng-7594	161	20	not	not	PART
fumecheng-7594	161	21	90	90	NUM
fumecheng-7594	161	22	°	°	NUM
fumecheng-7594	161	23	but	but	CCONJ
fumecheng-7594	161	24	rather	rather	ADV
fumecheng-7594	161	25	𝛿.	𝛿.	ADV
fumecheng-7594	161	26	thus	thus	ADV
fumecheng-7594	161	27	,	,	PUNCT
fumecheng-7594	161	28	the	the	DET
fumecheng-7594	161	29	contact	contact	NOUN
fumecheng-7594	161	30	point	point	NOUN
fumecheng-7594	161	31	between	between	ADP
fumecheng-7594	161	32	the	the	DET
fumecheng-7594	161	33	ruby	ruby	PROPN
fumecheng-7594	161	34	hemisphere	hemisphere	ADV
fumecheng-7594	161	35	and	and	CCONJ
fumecheng-7594	161	36	the	the	DET
fumecheng-7594	161	37	runner	runner	NOUN
fumecheng-7594	161	38	’s	’s	PART
fumecheng-7594	161	39	surface	surface	NOUN
fumecheng-7594	161	40	is	be	AUX
fumecheng-7594	161	41	shifted	shift	VERB
fumecheng-7594	161	42	from	from	ADP
fumecheng-7594	161	43	the	the	DET
fumecheng-7594	161	44	top	top	NOUN
fumecheng-7594	161	45	of	of	ADP
fumecheng-7594	161	46	the	the	DET
fumecheng-7594	161	47	ruby	ruby	NOUN
fumecheng-7594	161	48	hemisphere	hemisphere	ADV
fumecheng-7594	161	49	𝐶𝑖	𝐶𝑖	PROPN
fumecheng-7594	161	50	to	to	ADP
fumecheng-7594	161	51	𝐶𝑖	𝐶𝑖	PROPN
fumecheng-7594	161	52	′	′	NUM
fumecheng-7594	161	53	determined	determine	VERB
fumecheng-7594	161	54	by	by	ADP
fumecheng-7594	161	55	𝜃𝑖.	𝜃𝑖.	NOUN
fumecheng-7594	161	56	as	as	SCONJ
fumecheng-7594	161	57	shown	show	VERB
fumecheng-7594	161	58	in	in	ADP
fumecheng-7594	161	59	fig	fig	NOUN
fumecheng-7594	161	60	.	.	PUNCT
fumecheng-7594	162	1	7c	7c	NUM
fumecheng-7594	162	2	,	,	PUNCT
fumecheng-7594	162	3	in	in	ADP
fumecheng-7594	162	4	the	the	DET
fumecheng-7594	162	5	direction	direction	NOUN
fumecheng-7594	162	6	of	of	ADP
fumecheng-7594	162	7	the	the	DET
fumecheng-7594	162	8	movement	movement	NOUN
fumecheng-7594	163	1	𝑥	𝑥	NOUN
fumecheng-7594	163	2	,	,	PUNCT
fumecheng-7594	163	3	when	when	SCONJ
fumecheng-7594	163	4	one	one	NUM
fumecheng-7594	163	5	ruby	ruby	NOUN
fumecheng-7594	163	6	hemisphere	hemisphere	ADV
fumecheng-7594	163	7	is	be	AUX
fumecheng-7594	163	8	rotated	rotate	VERB
fumecheng-7594	163	9	with	with	ADP
fumecheng-7594	163	10	a	a	DET
fumecheng-7594	163	11	displacement	displacement	NOUN
fumecheng-7594	163	12	𝜑𝑖	𝜑𝑖	NOUN
fumecheng-7594	163	13	around	around	ADP
fumecheng-7594	163	14	𝛼𝑖	𝛼𝑖	PROPN
fumecheng-7594	163	15	,	,	PUNCT
fumecheng-7594	163	16	the	the	DET
fumecheng-7594	163	17	translational	translational	ADJ
fumecheng-7594	163	18	displacement	displacement	NOUN
fumecheng-7594	163	19	of	of	ADP
fumecheng-7594	163	20	𝐶𝑖	𝐶𝑖	PROPN
fumecheng-7594	163	21	and	and	CCONJ
fumecheng-7594	163	22	𝐶𝑖	𝐶𝑖	PROPN
fumecheng-7594	163	23	′	′	NUM
fumecheng-7594	163	24	are	be	AUX
fumecheng-7594	163	25	𝑥𝑎𝑖	𝑥𝑎𝑖	NOUN
fumecheng-7594	163	26	and	and	CCONJ
fumecheng-7594	163	27	𝑥𝑎𝑖	𝑥𝑎𝑖	NOUN
fumecheng-7594	163	28	′	′	NUM
fumecheng-7594	163	29	respectively	respectively	ADV
fumecheng-7594	163	30	,	,	PUNCT
fumecheng-7594	163	31	whose	whose	DET
fumecheng-7594	163	32	relation	relation	NOUN
fumecheng-7594	163	33	is	be	AUX
fumecheng-7594	163	34	followed	follow	VERB
fumecheng-7594	163	35	by	by	ADP
fumecheng-7594	163	36	the	the	DET
fumecheng-7594	163	37	eqs	eqs	PROPN
fumecheng-7594	163	38	.	.	PUNCT
fumecheng-7594	164	1	(	(	PUNCT
fumecheng-7594	164	2	3	3	X
fumecheng-7594	164	3	)	)	PUNCT
fumecheng-7594	164	4	and	and	CCONJ
fumecheng-7594	164	5	(	(	PUNCT
fumecheng-7594	164	6	4	4	NUM
fumecheng-7594	164	7	)	)	PUNCT
fumecheng-7594	164	8	.	.	PUNCT
fumecheng-7594	165	1	thus	thus	ADV
fumecheng-7594	165	2	,	,	PUNCT
fumecheng-7594	165	3	the	the	DET
fumecheng-7594	165	4	actuation	actuation	NOUN
fumecheng-7594	165	5	amplitude	amplitude	NOUN
fumecheng-7594	165	6	of	of	ADP
fumecheng-7594	165	7	the	the	DET
fumecheng-7594	165	8	actual	actual	ADJ
fumecheng-7594	165	9	contact	contact	NOUN
fumecheng-7594	165	10	point	point	NOUN
fumecheng-7594	165	11	𝐴𝑖	𝐴𝑖	PROPN
fumecheng-7594	165	12	′	′	NOUN
fumecheng-7594	165	13	can	can	AUX
fumecheng-7594	165	14	be	be	AUX
fumecheng-7594	165	15	smaller	small	ADJ
fumecheng-7594	165	16	than	than	ADP
fumecheng-7594	165	17	the	the	DET
fumecheng-7594	165	18	amplitude	amplitude	NOUN
fumecheng-7594	165	19	of	of	ADP
fumecheng-7594	165	20	the	the	DET
fumecheng-7594	165	21	ideal	ideal	ADJ
fumecheng-7594	165	22	case	case	NOUN
fumecheng-7594	165	23	𝐴𝑖	𝐴𝑖	PROPN
fumecheng-7594	165	24	determined	determine	VERB
fumecheng-7594	165	25	by	by	ADP
fumecheng-7594	165	26	the	the	DET
fumecheng-7594	165	27	variation	variation	NOUN
fumecheng-7594	165	28	of	of	ADP
fumecheng-7594	165	29	𝛿	𝛿	PRON
fumecheng-7594	165	30	around	around	ADP
fumecheng-7594	165	31	90	90	NUM
fumecheng-7594	165	32	°	°	NOUN
fumecheng-7594	165	33	.	.	PUNCT
fumecheng-7594	166	1	in	in	ADP
fumecheng-7594	166	2	this	this	DET
fumecheng-7594	166	3	case	case	NOUN
fumecheng-7594	166	4	,	,	PUNCT
fumecheng-7594	166	5	the	the	DET
fumecheng-7594	166	6	normal	normal	ADJ
fumecheng-7594	166	7	forces	force	NOUN
fumecheng-7594	166	8	applied	apply	VERB
fumecheng-7594	166	9	to	to	ADP
fumecheng-7594	166	10	the	the	DET
fumecheng-7594	166	11	contacts	contact	NOUN
fumecheng-7594	166	12	remain	remain	VERB
fumecheng-7594	166	13	unchanged	unchanged	ADJ
fumecheng-7594	166	14	.	.	PUNCT
fumecheng-7594	166	15	'	'	PUNCT
fumecheng-7594	166	16	'	'	PUNCT
fumecheng-7594	166	17	'	'	PUNCT
fumecheng-7594	166	18	'	'	PUNCT
fumecheng-7594	166	19	cos	cos	PROPN
fumecheng-7594	166	20	cos	cos	PROPN
fumecheng-7594	166	21	ai	ai	VERB
fumecheng-7594	166	22	i	i	PRON
fumecheng-7594	166	23	ai	ai	VERB
fumecheng-7594	166	24	ai	ai	INTJ
fumecheng-7594	166	25	i	i	PRON
fumecheng-7594	166	26	i	i	PRON
fumecheng-7594	167	1	i	i	PRON
fumecheng-7594	167	2	i	i	PRON
fumecheng-7594	167	3	ai	ai	VERB
fumecheng-7594	167	4	i	i	PRON
fumecheng-7594	167	5	i	i	INTJ
fumecheng-7594	167	6	x	x	VERB
fumecheng-7594	168	1	r	r	NOUN
fumecheng-7594	168	2	x	x	PUNCT
fumecheng-7594	168	3	x	x	X
fumecheng-7594	168	4	a	a	DET
fumecheng-7594	168	5	a	a	DET
fumecheng-7594	168	6	x	x	SYM
fumecheng-7594	168	7	r	r	NOUN
fumecheng-7594	168	8	=	=	NOUN
fumecheng-7594	168	9			NOUN
fumecheng-7594	168	10			PUNCT
fumecheng-7594	169	1	=	=	SYM
fumecheng-7594	169	2			NOUN
fumecheng-7594	170	1	=	=	NOUN
fumecheng-7594	170	2			NUM
fumecheng-7594	170	3	=	=	NUM
fumecheng-7594	170	4			NOUN
fumecheng-7594	170	5			PROPN
fumecheng-7594	170	6			PROPN
fumecheng-7594	170	7			PROPN
fumecheng-7594	170	8			PROPN
fumecheng-7594	170	9	(	(	PUNCT
fumecheng-7594	170	10	3	3	NUM
fumecheng-7594	170	11	)	)	PUNCT
fumecheng-7594	170	12	45	45	NUM
fumecheng-7594	170	13	2	2	NUM
fumecheng-7594	170	14	i	i	NOUN
fumecheng-7594	170	15	=	=	PUNCT
fumecheng-7594	170	16	−	−	PROPN
fumecheng-7594	170	17			NOUN
fumecheng-7594	170	18			NUM
fumecheng-7594	170	19			X
fumecheng-7594	170	20	(	(	PUNCT
fumecheng-7594	170	21	4	4	NUM
fumecheng-7594	170	22	)	)	PUNCT
fumecheng-7594	170	23	▪	▪	NOUN
fumecheng-7594	170	24	secondly	secondly	ADV
fumecheng-7594	170	25	,	,	PUNCT
fumecheng-7594	170	26	the	the	DET
fumecheng-7594	170	27	fabrication	fabrication	NOUN
fumecheng-7594	170	28	tolerance	tolerance	NOUN
fumecheng-7594	170	29	of	of	ADP
fumecheng-7594	170	30	the	the	DET
fumecheng-7594	170	31	runner	runner	NOUN
fumecheng-7594	170	32	is	be	AUX
fumecheng-7594	170	33	considered	consider	VERB
fumecheng-7594	170	34	.	.	PUNCT
fumecheng-7594	171	1	in	in	ADP
fumecheng-7594	171	2	fact	fact	NOUN
fumecheng-7594	171	3	,	,	PUNCT
fumecheng-7594	171	4	the	the	DET
fumecheng-7594	171	5	runner	runner	NOUN
fumecheng-7594	171	6	’s	’s	PART
fumecheng-7594	171	7	surfaces	surface	NOUN
fumecheng-7594	171	8	are	be	AUX
fumecheng-7594	171	9	not	not	PART
fumecheng-7594	171	10	perfectly	perfectly	ADV
fumecheng-7594	171	11	flat	flat	ADJ
fumecheng-7594	171	12	and	and	CCONJ
fumecheng-7594	171	13	geometrically	geometrically	ADV
fumecheng-7594	171	14	accurate	accurate	ADJ
fumecheng-7594	171	15	.	.	PUNCT
fumecheng-7594	172	1	as	as	SCONJ
fumecheng-7594	172	2	shown	show	VERB
fumecheng-7594	172	3	in	in	ADP
fumecheng-7594	172	4	fig	fig	NOUN
fumecheng-7594	172	5	.	.	PUNCT
fumecheng-7594	173	1	7b	7b	NOUN
fumecheng-7594	173	2	,	,	PUNCT
fumecheng-7594	173	3	the	the	DET
fumecheng-7594	173	4	angle	angle	NOUN
fumecheng-7594	173	5	between	between	ADP
fumecheng-7594	173	6	the	the	DET
fumecheng-7594	173	7	two	two	NUM
fumecheng-7594	173	8	working	work	VERB
fumecheng-7594	173	9	surfaces	surface	NOUN
fumecheng-7594	173	10	of	of	ADP
fumecheng-7594	173	11	the	the	DET
fumecheng-7594	173	12	runner	runner	NOUN
fumecheng-7594	173	13	is	be	AUX
fumecheng-7594	173	14	modeled	model	VERB
fumecheng-7594	173	15	by	by	ADP
fumecheng-7594	173	16	𝛾.	𝛾.	ADJ
fumecheng-7594	173	17	this	this	DET
fumecheng-7594	173	18	angle	angle	NOUN
fumecheng-7594	173	19	is	be	AUX
fumecheng-7594	173	20	changed	change	VERB
fumecheng-7594	173	21	around	around	ADP
fumecheng-7594	173	22	90	90	NUM
fumecheng-7594	173	23	°	°	NOUN
fumecheng-7594	173	24	.	.	PUNCT
fumecheng-7594	174	1	for	for	ADP
fumecheng-7594	174	2	this	this	DET
fumecheng-7594	174	3	case	case	NOUN
fumecheng-7594	174	4	,	,	PUNCT
fumecheng-7594	174	5	the	the	DET
fumecheng-7594	174	6	actual	actual	ADJ
fumecheng-7594	174	7	contact	contact	NOUN
fumecheng-7594	174	8	point	point	NOUN
fumecheng-7594	174	9	is	be	AUX
fumecheng-7594	174	10	not	not	PART
fumecheng-7594	174	11	𝐶𝑖	𝐶𝑖	PROPN
fumecheng-7594	174	12	but	but	CCONJ
fumecheng-7594	174	13	rather	rather	ADV
fumecheng-7594	175	1	𝐶𝑖	𝐶𝑖	PROPN
fumecheng-7594	175	2	′	′	NUM
fumecheng-7594	176	1	(	(	PUNCT
fumecheng-7594	176	2	the	the	DET
fumecheng-7594	176	3	dashed	dash	VERB
fumecheng-7594	176	4	,	,	PUNCT
fumecheng-7594	176	5	red	red	ADJ
fumecheng-7594	176	6	line	line	NOUN
fumecheng-7594	176	7	for	for	ADP
fumecheng-7594	176	8	the	the	DET
fumecheng-7594	176	9	real	real	ADJ
fumecheng-7594	176	10	situation	situation	NOUN
fumecheng-7594	176	11	)	)	PUNCT
fumecheng-7594	176	12	.	.	PUNCT
fumecheng-7594	177	1	similarly	similarly	ADV
fumecheng-7594	177	2	,	,	PUNCT
fumecheng-7594	177	3	the	the	DET
fumecheng-7594	177	4	actuation	actuation	NOUN
fumecheng-7594	177	5	amplitude	amplitude	NOUN
fumecheng-7594	177	6	of	of	ADP
fumecheng-7594	177	7	the	the	DET
fumecheng-7594	177	8	contact	contact	NOUN
fumecheng-7594	177	9	point	point	NOUN
fumecheng-7594	177	10	is	be	AUX
fumecheng-7594	177	11	changed	change	VERB
fumecheng-7594	177	12	and	and	CCONJ
fumecheng-7594	177	13	determined	determine	VERB
fumecheng-7594	177	14	by	by	ADP
fumecheng-7594	177	15	eqs	eqs	PROPN
fumecheng-7594	177	16	.	.	PUNCT
fumecheng-7594	178	1	(	(	PUNCT
fumecheng-7594	178	2	3	3	X
fumecheng-7594	178	3	)	)	PUNCT
fumecheng-7594	178	4	and	and	CCONJ
fumecheng-7594	178	5	(	(	PUNCT
fumecheng-7594	178	6	5	5	NUM
fumecheng-7594	178	7	)	)	PUNCT
fumecheng-7594	178	8	.	.	PUNCT
fumecheng-7594	179	1	consequently	consequently	ADV
fumecheng-7594	179	2	,	,	PUNCT
fumecheng-7594	179	3	compared	compare	VERB
fumecheng-7594	179	4	to	to	ADP
fumecheng-7594	179	5	the	the	DET
fumecheng-7594	179	6	ideal	ideal	ADJ
fumecheng-7594	179	7	case	case	NOUN
fumecheng-7594	179	8	with	with	ADP
fumecheng-7594	179	9	𝛾	𝛾	NOUN
fumecheng-7594	179	10	=	=	SYM
fumecheng-7594	179	11	90	90	NUM
fumecheng-7594	179	12	°	°	NUM
fumecheng-7594	179	13	,	,	PUNCT
fumecheng-7594	179	14	the	the	DET
fumecheng-7594	179	15	actual	actual	ADJ
fumecheng-7594	179	16	normal	normal	ADJ
fumecheng-7594	179	17	forces	force	NOUN
fumecheng-7594	179	18	applied	apply	VERB
fumecheng-7594	179	19	in	in	ADP
fumecheng-7594	179	20	each	each	DET
fumecheng-7594	179	21	fig	fig	NOUN
fumecheng-7594	179	22	.	.	PUNCT
fumecheng-7594	180	1	7	7	NUM
fumecheng-7594	180	2	modeling	modeling	NOUN
fumecheng-7594	180	3	of	of	ADP
fumecheng-7594	180	4	the	the	DET
fumecheng-7594	180	5	influence	influence	NOUN
fumecheng-7594	180	6	of	of	ADP
fumecheng-7594	180	7	the	the	DET
fumecheng-7594	180	8	fabrication	fabrication	NOUN
fumecheng-7594	180	9	and	and	CCONJ
fumecheng-7594	180	10	assembly	assembly	NOUN
fumecheng-7594	180	11	tolerance	tolerance	NOUN
fumecheng-7594	180	12	on	on	ADP
fumecheng-7594	180	13	actuation	actuation	NOUN
fumecheng-7594	180	14	amplitudes	amplitude	NOUN
fumecheng-7594	180	15	and	and	CCONJ
fumecheng-7594	180	16	normal	normal	ADJ
fumecheng-7594	180	17	forces	force	NOUN
fumecheng-7594	180	18	118	118	NUM
fumecheng-7594	180	19	h.	h.	PROPN
fumecheng-7594	180	20	x.	x.	PROPN
fumecheng-7594	180	21	nguyen	nguyen	PROPN
fumecheng-7594	180	22	,	,	PUNCT
fumecheng-7594	180	23	a.	a.	PROPN
fumecheng-7594	180	24	h.	h.	PROPN
fumecheng-7594	180	25	nguyen	nguyen	PROPN
fumecheng-7594	180	26	contact	contact	NOUN
fumecheng-7594	180	27	𝐹𝑁𝑖(𝑖	𝐹𝑁𝑖(𝑖	PUNCT
fumecheng-7594	180	28	=	=	SYM
fumecheng-7594	180	29	1	1	NUM
fumecheng-7594	180	30	÷	÷	NUM
fumecheng-7594	180	31	6	6	NUM
fumecheng-7594	180	32	)	)	PUNCT
fumecheng-7594	180	33	are	be	AUX
fumecheng-7594	180	34	formulated	formulate	VERB
fumecheng-7594	180	35	by	by	ADP
fumecheng-7594	180	36	eq	eq	PROPN
fumecheng-7594	180	37	.	.	PUNCT
fumecheng-7594	181	1	(	(	PUNCT
fumecheng-7594	181	2	6	6	NUM
fumecheng-7594	181	3	)	)	PUNCT
fumecheng-7594	181	4	,	,	PUNCT
fumecheng-7594	181	5	where	where	SCONJ
fumecheng-7594	181	6	𝐹𝑁𝑖	𝐹𝑁𝑖	ADV
fumecheng-7594	181	7	𝑧	𝑧	X
fumecheng-7594	181	8	(	(	PUNCT
fumecheng-7594	181	9	𝑖	𝑖	SYM
fumecheng-7594	181	10	=	=	SYM
fumecheng-7594	181	11	1	1	NUM
fumecheng-7594	181	12	÷	÷	NUM
fumecheng-7594	181	13	6	6	NUM
fumecheng-7594	181	14	)	)	PUNCT
fumecheng-7594	181	15	are	be	AUX
fumecheng-7594	181	16	the	the	DET
fumecheng-7594	181	17	projection	projection	NOUN
fumecheng-7594	181	18	of	of	ADP
fumecheng-7594	181	19	𝐹𝑁𝑖	𝐹𝑁𝑖	ADJ
fumecheng-7594	181	20	on	on	ADP
fumecheng-7594	181	21	the	the	DET
fumecheng-7594	181	22	𝑧	𝑧	PRON
fumecheng-7594	181	23	direction	direction	NOUN
fumecheng-7594	181	24	;	;	PUNCT
fumecheng-7594	181	25	𝐹𝑝	𝐹𝑝	PROPN
fumecheng-7594	181	26	presents	present	VERB
fumecheng-7594	181	27	for	for	ADP
fumecheng-7594	181	28	the	the	DET
fumecheng-7594	181	29	preload	preload	NOUN
fumecheng-7594	181	30	(	(	PUNCT
fumecheng-7594	181	31	see	see	VERB
fumecheng-7594	181	32	fig	fig	NOUN
fumecheng-7594	181	33	.	.	PUNCT
fumecheng-7594	182	1	7d	7d	NUM
fumecheng-7594	182	2	)	)	PUNCT
fumecheng-7594	182	3	.	.	PUNCT
fumecheng-7594	183	1	45	45	NUM
fumecheng-7594	183	2	2	2	NUM
fumecheng-7594	183	3	i	i	NOUN
fumecheng-7594	183	4	=	=	PUNCT
fumecheng-7594	183	5	−	−	PROPN
fumecheng-7594	183	6			NOUN
fumecheng-7594	183	7			NUM
fumecheng-7594	183	8			X
fumecheng-7594	183	9	(	(	PUNCT
fumecheng-7594	183	10	5	5	NUM
fumecheng-7594	183	11	)	)	SYM
fumecheng-7594	183	12	1	1	NUM
fumecheng-7594	183	13	2	2	NUM
fumecheng-7594	183	14	3	3	NUM
fumecheng-7594	183	15	4	4	NUM
fumecheng-7594	183	16	5	5	NUM
fumecheng-7594	183	17	6	6	NUM
fumecheng-7594	183	18	sin	sin	NOUN
fumecheng-7594	183	19	2	2	NUM
fumecheng-7594	183	20	z	z	NOUN
fumecheng-7594	183	21	ni	ni	PROPN
fumecheng-7594	183	22	ni	ni	PROPN
fumecheng-7594	183	23	z	z	PROPN
fumecheng-7594	183	24	z	z	PROPN
fumecheng-7594	183	25	z	z	NOUN
fumecheng-7594	183	26	z	z	NOUN
fumecheng-7594	183	27	z	z	NOUN
fumecheng-7594	183	28	z	z	NOUN
fumecheng-7594	183	29	n	n	CCONJ
fumecheng-7594	183	30	n	n	CCONJ
fumecheng-7594	183	31	n	n	CCONJ
fumecheng-7594	183	32	n	n	CCONJ
fumecheng-7594	183	33	n	n	CCONJ
fumecheng-7594	183	34	n	n	PROPN
fumecheng-7594	183	35	p	p	NOUN
fumecheng-7594	183	36	f	f	X
fumecheng-7594	184	1	f	f	X
fumecheng-7594	184	2	f	f	PROPN
fumecheng-7594	185	1	f	f	PROPN
fumecheng-7594	185	2	f	f	X
fumecheng-7594	186	1	f	f	X
fumecheng-7594	186	2	f	f	PROPN
fumecheng-7594	186	3	f	f	PROPN
fumecheng-7594	186	4	f	f	PROPN
fumecheng-7594	186	5			NOUN
fumecheng-7594	187	1	=	=	SYM
fumecheng-7594	187	2			NUM
fumecheng-7594	187	3			NOUN
fumecheng-7594	187	4			VERB
fumecheng-7594	187	5			PROPN
fumecheng-7594	187	6			NOUN
fumecheng-7594	187	7			PROPN
fumecheng-7594	187	8			VERB
fumecheng-7594	187	9			NOUN
fumecheng-7594	187	10	+	+	NOUN
fumecheng-7594	187	11	=	=	SYM
fumecheng-7594	188	1	+	+	PUNCT
fumecheng-7594	188	2	+	+	CCONJ
fumecheng-7594	188	3	+	+	CCONJ
fumecheng-7594	188	4	=	=	NOUN
fumecheng-7594	188	5			NUM
fumecheng-7594	188	6			NUM
fumecheng-7594	188	7	(	(	PUNCT
fumecheng-7594	188	8	6	6	NUM
fumecheng-7594	188	9	)	)	PUNCT
fumecheng-7594	188	10	the	the	DET
fumecheng-7594	188	11	friction	friction	NOUN
fumecheng-7594	188	12	forces	force	NOUN
fumecheng-7594	189	1	𝐹𝑓𝑖	𝐹𝑓𝑖	NOUN
fumecheng-7594	189	2	(	(	PUNCT
fumecheng-7594	189	3	𝑖	𝑖	NOUN
fumecheng-7594	189	4	=	=	SYM
fumecheng-7594	189	5	1	1	NUM
fumecheng-7594	189	6	÷	÷	NUM
fumecheng-7594	189	7	6	6	NUM
fumecheng-7594	189	8	)	)	PUNCT
fumecheng-7594	189	9	in	in	ADP
fumecheng-7594	189	10	eqs	eqs	PROPN
fumecheng-7594	189	11	.	.	PUNCT
fumecheng-7594	190	1	(	(	PUNCT
fumecheng-7594	190	2	1	1	X
fumecheng-7594	190	3	)	)	PUNCT
fumecheng-7594	190	4	and	and	CCONJ
fumecheng-7594	190	5	(	(	PUNCT
fumecheng-7594	190	6	2	2	X
fumecheng-7594	190	7	)	)	PUNCT
fumecheng-7594	190	8	can	can	AUX
fumecheng-7594	190	9	be	be	AUX
fumecheng-7594	190	10	modeled	model	VERB
fumecheng-7594	190	11	and	and	CCONJ
fumecheng-7594	190	12	calculated	calculate	VERB
fumecheng-7594	190	13	via	via	ADP
fumecheng-7594	190	14	the	the	DET
fumecheng-7594	190	15	mdr	mdr	PROPN
fumecheng-7594	191	1	[	[	X
fumecheng-7594	191	2	17	17	NUM
fumecheng-7594	191	3	]	]	PUNCT
fumecheng-7594	191	4	.	.	PUNCT
fumecheng-7594	192	1	since	since	SCONJ
fumecheng-7594	192	2	this	this	DET
fumecheng-7594	192	3	model	model	NOUN
fumecheng-7594	192	4	was	be	AUX
fumecheng-7594	192	5	already	already	ADV
fumecheng-7594	192	6	described	describe	VERB
fumecheng-7594	192	7	in	in	ADP
fumecheng-7594	192	8	detail	detail	NOUN
fumecheng-7594	192	9	in	in	ADP
fumecheng-7594	192	10	previously	previously	ADV
fumecheng-7594	192	11	published	publish	VERB
fumecheng-7594	192	12	works	work	NOUN
fumecheng-7594	192	13	[	[	X
fumecheng-7594	192	14	3	3	NUM
fumecheng-7594	192	15	,	,	PUNCT
fumecheng-7594	192	16	10	10	NUM
fumecheng-7594	192	17	,	,	PUNCT
fumecheng-7594	192	18	18	18	NUM
fumecheng-7594	192	19	-	-	SYM
fumecheng-7594	192	20	20	20	NUM
fumecheng-7594	192	21	,	,	PUNCT
fumecheng-7594	192	22	22	22	NUM
fumecheng-7594	192	23	]	]	PUNCT
fumecheng-7594	192	24	.	.	PUNCT
fumecheng-7594	193	1	thus	thus	ADV
fumecheng-7594	193	2	,	,	PUNCT
fumecheng-7594	193	3	we	we	PRON
fumecheng-7594	193	4	only	only	ADV
fumecheng-7594	193	5	briefly	briefly	ADV
fumecheng-7594	193	6	present	present	VERB
fumecheng-7594	193	7	the	the	DET
fumecheng-7594	193	8	theory	theory	NOUN
fumecheng-7594	193	9	in	in	ADP
fumecheng-7594	193	10	this	this	DET
fumecheng-7594	193	11	paper	paper	NOUN
fumecheng-7594	193	12	.	.	PUNCT
fumecheng-7594	194	1	fig	fig	NOUN
fumecheng-7594	194	2	.	.	PUNCT
fumecheng-7594	195	1	8b	8b	PROPN
fumecheng-7594	195	2	shows	show	VERB
fumecheng-7594	195	3	an	an	DET
fumecheng-7594	195	4	equivalent	equivalent	ADJ
fumecheng-7594	195	5	one	one	NUM
fumecheng-7594	195	6	-	-	PUNCT
fumecheng-7594	195	7	dimensional	dimensional	ADJ
fumecheng-7594	195	8	contact	contact	NOUN
fumecheng-7594	195	9	model	model	NOUN
fumecheng-7594	195	10	from	from	ADP
fumecheng-7594	195	11	the	the	DET
fumecheng-7594	195	12	original	original	ADJ
fumecheng-7594	195	13	three	three	NUM
fumecheng-7594	195	14	-	-	PUNCT
fumecheng-7594	195	15	dimensional	dimensional	ADJ
fumecheng-7594	195	16	model	model	NOUN
fumecheng-7594	195	17	(	(	PUNCT
fumecheng-7594	195	18	fig	fig	NOUN
fumecheng-7594	195	19	.	.	PUNCT
fumecheng-7594	196	1	8a	8a	NUM
fumecheng-7594	196	2	)	)	PUNCT
fumecheng-7594	196	3	,	,	PUNCT
fumecheng-7594	196	4	where	where	SCONJ
fumecheng-7594	196	5	the	the	DET
fumecheng-7594	196	6	elastic	elastic	ADJ
fumecheng-7594	196	7	space	space	NOUN
fumecheng-7594	196	8	is	be	AUX
fumecheng-7594	196	9	replaced	replace	VERB
fumecheng-7594	196	10	by	by	ADP
fumecheng-7594	196	11	an	an	DET
fumecheng-7594	196	12	elastic	elastic	ADJ
fumecheng-7594	196	13	foundation	foundation	NOUN
fumecheng-7594	196	14	with	with	ADP
fumecheng-7594	196	15	a	a	DET
fumecheng-7594	196	16	set	set	NOUN
fumecheng-7594	196	17	of	of	ADP
fumecheng-7594	196	18	springs	spring	NOUN
fumecheng-7594	196	19	.	.	PUNCT
fumecheng-7594	197	1	these	these	DET
fumecheng-7594	197	2	springs	spring	NOUN
fumecheng-7594	197	3	have	have	VERB
fumecheng-7594	197	4	normal	normal	ADJ
fumecheng-7594	197	5	stiffness	stiffness	NOUN
fumecheng-7594	197	6	∆𝑘𝑧	∆𝑘𝑧	NOUN
fumecheng-7594	197	7	and	and	CCONJ
fumecheng-7594	197	8	tangential	tangential	ADJ
fumecheng-7594	197	9	stiffness	stiffness	NOUN
fumecheng-7594	197	10	∆𝑘𝑥	∆𝑘𝑥	NOUN
fumecheng-7594	197	11	,	,	PUNCT
fumecheng-7594	197	12	which	which	PRON
fumecheng-7594	197	13	are	be	AUX
fumecheng-7594	197	14	chosen	choose	VERB
fumecheng-7594	197	15	according	accord	VERB
fumecheng-7594	197	16	to	to	ADP
fumecheng-7594	197	17	the	the	DET
fumecheng-7594	197	18	following	follow	VERB
fumecheng-7594	197	19	rules	rule	NOUN
fumecheng-7594	197	20	:	:	PUNCT
fumecheng-7594	197	21	*	*	PUNCT
fumecheng-7594	197	22	;	;	PUNCT
fumecheng-7594	197	23	*	*	PUNCT
fumecheng-7594	197	24	z	z	X
fumecheng-7594	197	25	xk	xk	X
fumecheng-7594	197	26	e	e	X
fumecheng-7594	197	27	x	x	X
fumecheng-7594	197	28	k	k	PROPN
fumecheng-7594	197	29	g	g	PROPN
fumecheng-7594	197	30	x	x	PROPN
fumecheng-7594	197	31	=	=	PUNCT
fumecheng-7594	198	1			X
fumecheng-7594	198	2			X
fumecheng-7594	198	3	=	=	PUNCT
fumecheng-7594	199	1			X
fumecheng-7594	199	2	,	,	PUNCT
fumecheng-7594	199	3	(	(	PUNCT
fumecheng-7594	199	4	7	7	X
fumecheng-7594	199	5	)	)	PUNCT
fumecheng-7594	199	6	where	where	SCONJ
fumecheng-7594	199	7	∆𝑥	∆𝑥	PROPN
fumecheng-7594	199	8	is	be	AUX
fumecheng-7594	199	9	the	the	DET
fumecheng-7594	199	10	distance	distance	NOUN
fumecheng-7594	199	11	between	between	ADP
fumecheng-7594	199	12	the	the	DET
fumecheng-7594	199	13	spring	spring	NOUN
fumecheng-7594	199	14	,	,	PUNCT
fumecheng-7594	199	15	and	and	CCONJ
fumecheng-7594	199	16	𝐸∗	𝐸∗	NOUN
fumecheng-7594	199	17	and	and	CCONJ
fumecheng-7594	199	18	𝐺∗	𝐺∗	PROPN
fumecheng-7594	199	19	are	be	AUX
fumecheng-7594	199	20	respectively	respectively	ADV
fumecheng-7594	199	21	the	the	DET
fumecheng-7594	199	22	equivalent	equivalent	ADJ
fumecheng-7594	199	23	elastic	elastic	ADJ
fumecheng-7594	199	24	and	and	CCONJ
fumecheng-7594	199	25	shear	shear	NOUN
fumecheng-7594	199	26	modulus	modulus	NOUN
fumecheng-7594	199	27	.	.	PUNCT
fumecheng-7594	200	1	the	the	DET
fumecheng-7594	200	2	radius	radius	NOUN
fumecheng-7594	200	3	of	of	ADP
fumecheng-7594	200	4	the	the	DET
fumecheng-7594	200	5	one	one	NUM
fumecheng-7594	200	6	-	-	PUNCT
fumecheng-7594	200	7	dimensional	dimensional	ADJ
fumecheng-7594	200	8	profile	profile	NOUN
fumecheng-7594	200	9	𝑅1	𝑅1	PROPN
fumecheng-7594	200	10	must	must	AUX
fumecheng-7594	200	11	be	be	AUX
fumecheng-7594	200	12	:	:	PUNCT
fumecheng-7594	200	13	1	1	NUM
fumecheng-7594	200	14	2	2	NUM
fumecheng-7594	200	15	r	r	NOUN
fumecheng-7594	200	16	r	r	NOUN
fumecheng-7594	200	17	=	=	PUNCT
fumecheng-7594	200	18	.	.	PUNCT
fumecheng-7594	201	1	(	(	PUNCT
fumecheng-7594	201	2	8)	8)	NUM
fumecheng-7594	201	3	using	use	VERB
fumecheng-7594	201	4	this	this	DET
fumecheng-7594	201	5	simplified	simplified	ADJ
fumecheng-7594	201	6	model	model	NOUN
fumecheng-7594	201	7	,	,	PUNCT
fumecheng-7594	201	8	the	the	DET
fumecheng-7594	201	9	dynamically	dynamically	ADV
fumecheng-7594	201	10	changing	change	VERB
fumecheng-7594	201	11	contact	contact	NOUN
fumecheng-7594	201	12	area	area	NOUN
fumecheng-7594	201	13	is	be	AUX
fumecheng-7594	201	14	estimated	estimate	VERB
fumecheng-7594	201	15	and	and	CCONJ
fumecheng-7594	201	16	thus	thus	ADV
fumecheng-7594	201	17	,	,	PUNCT
fumecheng-7594	201	18	the	the	DET
fumecheng-7594	201	19	friction	friction	NOUN
fumecheng-7594	201	20	force	force	NOUN
fumecheng-7594	201	21	is	be	AUX
fumecheng-7594	201	22	computed	compute	VERB
fumecheng-7594	201	23	.	.	PUNCT
fumecheng-7594	202	1	at	at	ADP
fumecheng-7594	202	2	each	each	DET
fumecheng-7594	202	3	instant	instant	NOUN
fumecheng-7594	202	4	of	of	ADP
fumecheng-7594	202	5	time	time	NOUN
fumecheng-7594	202	6	𝑡	𝑡	PROPN
fumecheng-7594	202	7	of	of	ADP
fumecheng-7594	202	8	a	a	DET
fumecheng-7594	202	9	dynamic	dynamic	ADJ
fumecheng-7594	202	10	simulation	simulation	NOUN
fumecheng-7594	202	11	,	,	PUNCT
fumecheng-7594	202	12	the	the	DET
fumecheng-7594	202	13	changing	change	VERB
fumecheng-7594	202	14	stick	stick	NOUN
fumecheng-7594	202	15	and	and	CCONJ
fumecheng-7594	202	16	slip	slip	VERB
fumecheng-7594	202	17	area	area	NOUN
fumecheng-7594	202	18	of	of	ADP
fumecheng-7594	202	19	the	the	DET
fumecheng-7594	202	20	contact	contact	NOUN
fumecheng-7594	202	21	is	be	AUX
fumecheng-7594	202	22	determined	determine	VERB
fumecheng-7594	202	23	by	by	ADP
fumecheng-7594	202	24	the	the	DET
fumecheng-7594	202	25	state	state	NOUN
fumecheng-7594	202	26	of	of	ADP
fumecheng-7594	202	27	the	the	DET
fumecheng-7594	202	28	springs	spring	NOUN
fumecheng-7594	202	29	in	in	ADP
fumecheng-7594	202	30	the	the	DET
fumecheng-7594	202	31	contact	contact	NOUN
fumecheng-7594	202	32	and	and	CCONJ
fumecheng-7594	202	33	the	the	DET
fumecheng-7594	202	34	friction	friction	NOUN
fumecheng-7594	202	35	force	force	NOUN
fumecheng-7594	202	36	is	be	AUX
fumecheng-7594	202	37	calculated	calculate	VERB
fumecheng-7594	202	38	as	as	SCONJ
fumecheng-7594	202	39	follows	follow	VERB
fumecheng-7594	202	40	:	:	PUNCT
fumecheng-7594	202	41	,	,	PUNCT
fumecheng-7594	202	42	1	1	NUM
fumecheng-7594	202	43	(	(	PUNCT
fumecheng-7594	202	44	)	)	PUNCT
fumecheng-7594	202	45	(	(	PUNCT
fumecheng-7594	202	46	)	)	PUNCT
fumecheng-7594	202	47	,	,	PUNCT
fumecheng-7594	202	48	1	1	NUM
fumecheng-7594	202	49	6	6	NUM
fumecheng-7594	202	50	n	n	NUM
fumecheng-7594	202	51	fi	fi	NOUN
fumecheng-7594	203	1	x	x	X
fumecheng-7594	203	2	j	j	PROPN
fumecheng-7594	203	3	j	j	PROPN
fumecheng-7594	204	1	f	f	PROPN
fumecheng-7594	204	2	t	t	PROPN
fumecheng-7594	204	3	f	f	PROPN
fumecheng-7594	204	4	t	t	PROPN
fumecheng-7594	205	1	i	i	NOUN
fumecheng-7594	205	2	=	=	PUNCT
fumecheng-7594	206	1	=	=	PUNCT
fumecheng-7594	206	2	=	=	NOUN
fumecheng-7594	206	3			NUM
fumecheng-7594	206	4	,	,	PUNCT
fumecheng-7594	206	5	(	(	PUNCT
fumecheng-7594	206	6	9	9	X
fumecheng-7594	206	7	)	)	PUNCT
fumecheng-7594	206	8	where	where	SCONJ
fumecheng-7594	206	9	𝑓𝑥,𝑗(𝑡	𝑓𝑥,𝑗(𝑡	NOUN
fumecheng-7594	206	10	)	)	PUNCT
fumecheng-7594	206	11	is	be	AUX
fumecheng-7594	206	12	the	the	DET
fumecheng-7594	206	13	tangential	tangential	ADJ
fumecheng-7594	206	14	force	force	NOUN
fumecheng-7594	206	15	of	of	ADP
fumecheng-7594	206	16	the	the	DET
fumecheng-7594	206	17	springs	spring	NOUN
fumecheng-7594	206	18	in	in	ADP
fumecheng-7594	206	19	the	the	DET
fumecheng-7594	206	20	contact	contact	NOUN
fumecheng-7594	206	21	,	,	PUNCT
fumecheng-7594	206	22	whose	whose	DET
fumecheng-7594	206	23	value	value	NOUN
fumecheng-7594	206	24	depends	depend	VERB
fumecheng-7594	206	25	on	on	ADP
fumecheng-7594	206	26	the	the	DET
fumecheng-7594	206	27	state	state	NOUN
fumecheng-7594	206	28	of	of	ADP
fumecheng-7594	206	29	each	each	DET
fumecheng-7594	206	30	spring	spring	NOUN
fumecheng-7594	206	31	(	(	PUNCT
fumecheng-7594	206	32	stick	stick	NOUN
fumecheng-7594	206	33	or	or	CCONJ
fumecheng-7594	206	34	slip	slip	NOUN
fumecheng-7594	206	35	)	)	PUNCT
fumecheng-7594	206	36	related	relate	VERB
fumecheng-7594	206	37	to	to	ADP
fumecheng-7594	206	38	the	the	DET
fumecheng-7594	206	39	normal	normal	ADJ
fumecheng-7594	206	40	force	force	NOUN
fumecheng-7594	206	41	𝐹𝑁𝑖	𝐹𝑁𝑖	ADV
fumecheng-7594	206	42	;	;	PUNCT
fumecheng-7594	206	43	𝑁	𝑁	PROPN
fumecheng-7594	206	44	is	be	AUX
fumecheng-7594	206	45	the	the	DET
fumecheng-7594	206	46	number	number	NOUN
fumecheng-7594	206	47	of	of	ADP
fumecheng-7594	206	48	springs	spring	NOUN
fumecheng-7594	206	49	in	in	ADP
fumecheng-7594	206	50	contact	contact	NOUN
fumecheng-7594	206	51	𝑖.	𝑖.	ADV
fumecheng-7594	207	1	(	(	PUNCT
fumecheng-7594	207	2	a	a	X
fumecheng-7594	207	3	)	)	PUNCT
fumecheng-7594	207	4	(	(	PUNCT
fumecheng-7594	207	5	b	b	X
fumecheng-7594	207	6	)	)	PUNCT
fumecheng-7594	207	7	fig	fig	NOUN
fumecheng-7594	207	8	.	.	PUNCT
fumecheng-7594	208	1	8	8	NUM
fumecheng-7594	208	2	modeling	modeling	NOUN
fumecheng-7594	208	3	of	of	ADP
fumecheng-7594	208	4	the	the	DET
fumecheng-7594	208	5	micro	micro	NOUN
fumecheng-7594	208	6	-	-	NOUN
fumecheng-7594	208	7	contact	contact	NOUN
fumecheng-7594	208	8	using	use	VERB
fumecheng-7594	208	9	mdr	mdr	PROPN
fumecheng-7594	208	10	:	:	PUNCT
fumecheng-7594	208	11	a	a	X
fumecheng-7594	208	12	)	)	PUNCT
fumecheng-7594	208	13	three	three	NUM
fumecheng-7594	208	14	-	-	PUNCT
fumecheng-7594	208	15	dimensional	dimensional	ADJ
fumecheng-7594	208	16	contact	contact	NOUN
fumecheng-7594	208	17	model	model	NOUN
fumecheng-7594	208	18	;	;	PUNCT
fumecheng-7594	208	19	b	b	X
fumecheng-7594	208	20	)	)	PUNCT
fumecheng-7594	208	21	one	one	NUM
fumecheng-7594	208	22	-	-	PUNCT
fumecheng-7594	208	23	dimensional	dimensional	ADJ
fumecheng-7594	208	24	contact	contact	NOUN
fumecheng-7594	208	25	model	model	NOUN
fumecheng-7594	208	26	via	via	ADP
fumecheng-7594	208	27	mdr	mdr	PROPN
fumecheng-7594	209	1	[	[	X
fumecheng-7594	209	2	17	17	NUM
fumecheng-7594	209	3	,	,	PUNCT
fumecheng-7594	209	4	18	18	NUM
fumecheng-7594	209	5	]	]	PUNCT
fumecheng-7594	209	6	investigation	investigation	NOUN
fumecheng-7594	209	7	of	of	ADP
fumecheng-7594	209	8	influences	influence	NOUN
fumecheng-7594	209	9	of	of	ADP
fumecheng-7594	209	10	fabrication	fabrication	NOUN
fumecheng-7594	209	11	tolerances	tolerance	NOUN
fumecheng-7594	209	12	on	on	ADP
fumecheng-7594	209	13	operational	operational	ADJ
fumecheng-7594	209	14	characteristics	characteristic	NOUN
fumecheng-7594	209	15	of	of	ADP
fumecheng-7594	209	16	piezo	piezo	NOUN
fumecheng-7594	209	17	-	-	ADJ
fumecheng-7594	209	18	actuated	actuated	ADJ
fumecheng-7594	209	19	...	...	PUNCT
fumecheng-7594	209	20	119	119	NUM
fumecheng-7594	209	21	3.2	3.2	NUM
fumecheng-7594	209	22	.	.	PUNCT
fumecheng-7594	210	1	hybrid	hybrid	ADJ
fumecheng-7594	210	2	dynamic	dynamic	ADJ
fumecheng-7594	210	3	simulation	simulation	NOUN
fumecheng-7594	210	4	simulations	simulation	NOUN
fumecheng-7594	210	5	were	be	AUX
fumecheng-7594	210	6	performed	perform	VERB
fumecheng-7594	210	7	using	use	VERB
fumecheng-7594	210	8	a	a	DET
fumecheng-7594	210	9	hybrid	hybrid	ADJ
fumecheng-7594	210	10	dynamic	dynamic	ADJ
fumecheng-7594	210	11	algorithm	algorithm	NOUN
fumecheng-7594	210	12	(	(	PUNCT
fumecheng-7594	210	13	see	see	VERB
fumecheng-7594	210	14	fig	fig	NOUN
fumecheng-7594	210	15	.	.	PUNCT
fumecheng-7594	211	1	5	5	NUM
fumecheng-7594	211	2	of	of	ADP
fumecheng-7594	211	3	[	[	X
fumecheng-7594	211	4	18	18	NUM
fumecheng-7594	211	5	]	]	NUM
fumecheng-7594	211	6	)	)	PUNCT
fumecheng-7594	211	7	,	,	PUNCT
fumecheng-7594	211	8	in	in	ADP
fumecheng-7594	211	9	which	which	PRON
fumecheng-7594	211	10	a	a	DET
fumecheng-7594	211	11	macroscopic	macroscopic	ADJ
fumecheng-7594	211	12	model	model	NOUN
fumecheng-7594	211	13	is	be	AUX
fumecheng-7594	211	14	combined	combine	VERB
fumecheng-7594	211	15	with	with	ADP
fumecheng-7594	211	16	a	a	DET
fumecheng-7594	211	17	microscopic	microscopic	ADJ
fumecheng-7594	211	18	model	model	NOUN
fumecheng-7594	211	19	.	.	PUNCT
fumecheng-7594	212	1	thus	thus	ADV
fumecheng-7594	212	2	,	,	PUNCT
fumecheng-7594	212	3	in	in	ADP
fumecheng-7594	212	4	each	each	DET
fumecheng-7594	212	5	time	time	NOUN
fumecheng-7594	212	6	step	step	NOUN
fumecheng-7594	212	7	,	,	PUNCT
fumecheng-7594	212	8	the	the	DET
fumecheng-7594	212	9	runner	runner	NOUN
fumecheng-7594	212	10	's	's	PART
fumecheng-7594	212	11	overall	overall	ADJ
fumecheng-7594	212	12	macroscopic	macroscopic	ADJ
fumecheng-7594	212	13	movement	movement	NOUN
fumecheng-7594	212	14	is	be	AUX
fumecheng-7594	212	15	computed	compute	VERB
fumecheng-7594	212	16	and	and	CCONJ
fumecheng-7594	212	17	coupled	couple	VERB
fumecheng-7594	212	18	with	with	ADP
fumecheng-7594	212	19	the	the	DET
fumecheng-7594	212	20	microscopic	microscopic	ADJ
fumecheng-7594	212	21	dynamic	dynamic	ADJ
fumecheng-7594	212	22	behavior	behavior	NOUN
fumecheng-7594	212	23	of	of	ADP
fumecheng-7594	212	24	the	the	DET
fumecheng-7594	212	25	guiding	guide	VERB
fumecheng-7594	212	26	contacts	contact	NOUN
fumecheng-7594	212	27	using	use	VERB
fumecheng-7594	212	28	routines	routine	NOUN
fumecheng-7594	212	29	of	of	ADP
fumecheng-7594	212	30	matlab	matlab	PROPN
fumecheng-7594	212	31	®	®	NOUN
fumecheng-7594	212	32	version	version	NOUN
fumecheng-7594	212	33	2015a	2015a	NUM
fumecheng-7594	212	34	.	.	PUNCT
fumecheng-7594	213	1	basic	basic	ADJ
fumecheng-7594	213	2	parameters	parameter	NOUN
fumecheng-7594	213	3	of	of	ADP
fumecheng-7594	213	4	the	the	DET
fumecheng-7594	213	5	drive	drive	NOUN
fumecheng-7594	213	6	used	use	VERB
fumecheng-7594	213	7	for	for	ADP
fumecheng-7594	213	8	numerical	numerical	ADJ
fumecheng-7594	213	9	simulations	simulation	NOUN
fumecheng-7594	213	10	are	be	AUX
fumecheng-7594	213	11	collected	collect	VERB
fumecheng-7594	213	12	from	from	ADP
fumecheng-7594	213	13	[	[	X
fumecheng-7594	213	14	20	20	NUM
fumecheng-7594	213	15	]	]	PUNCT
fumecheng-7594	213	16	and	and	CCONJ
fumecheng-7594	213	17	listed	list	VERB
fumecheng-7594	213	18	in	in	ADP
fumecheng-7594	213	19	table	table	NOUN
fumecheng-7594	213	20	1	1	NUM
fumecheng-7594	213	21	.	.	PUNCT
fumecheng-7594	214	1	the	the	DET
fumecheng-7594	214	2	dynamic	dynamic	ADJ
fumecheng-7594	214	3	parameters	parameter	NOUN
fumecheng-7594	214	4	of	of	ADP
fumecheng-7594	214	5	the	the	DET
fumecheng-7594	214	6	actuators	actuator	NOUN
fumecheng-7594	214	7	,	,	PUNCT
fumecheng-7594	214	8	which	which	PRON
fumecheng-7594	214	9	are	be	AUX
fumecheng-7594	214	10	depended	depend	VERB
fumecheng-7594	214	11	on	on	ADP
fumecheng-7594	214	12	the	the	DET
fumecheng-7594	214	13	radius	radius	NOUN
fumecheng-7594	214	14	of	of	ADP
fumecheng-7594	214	15	the	the	DET
fumecheng-7594	214	16	ruby	ruby	PROPN
fumecheng-7594	214	17	hemispheres	hemisphere	NOUN
fumecheng-7594	214	18	,	,	PUNCT
fumecheng-7594	214	19	are	be	AUX
fumecheng-7594	214	20	referred	refer	VERB
fumecheng-7594	214	21	from	from	ADP
fumecheng-7594	214	22	[	[	X
fumecheng-7594	214	23	14	14	NUM
fumecheng-7594	214	24	]	]	PUNCT
fumecheng-7594	214	25	and	and	CCONJ
fumecheng-7594	214	26	shown	show	VERB
fumecheng-7594	214	27	in	in	ADP
fumecheng-7594	214	28	table	table	NOUN
fumecheng-7594	214	29	2	2	NUM
fumecheng-7594	214	30	.	.	PUNCT
fumecheng-7594	214	31	additionally	additionally	ADV
fumecheng-7594	214	32	,	,	PUNCT
fumecheng-7594	214	33	the	the	DET
fumecheng-7594	214	34	preload	preload	NOUN
fumecheng-7594	214	35	range	range	NOUN
fumecheng-7594	214	36	and	and	CCONJ
fumecheng-7594	214	37	the	the	DET
fumecheng-7594	214	38	actuation	actuation	NOUN
fumecheng-7594	214	39	amplitude	amplitude	NOUN
fumecheng-7594	214	40	of	of	ADP
fumecheng-7594	214	41	the	the	DET
fumecheng-7594	214	42	guiding	guide	VERB
fumecheng-7594	214	43	contacts	contact	NOUN
fumecheng-7594	214	44	were	be	AUX
fumecheng-7594	214	45	set	set	VERB
fumecheng-7594	214	46	according	accord	VERB
fumecheng-7594	214	47	to	to	ADP
fumecheng-7594	214	48	the	the	DET
fumecheng-7594	214	49	experimental	experimental	ADJ
fumecheng-7594	214	50	implementation	implementation	NOUN
fumecheng-7594	214	51	in	in	ADP
fumecheng-7594	214	52	[	[	X
fumecheng-7594	214	53	10	10	NUM
fumecheng-7594	214	54	]	]	PUNCT
fumecheng-7594	214	55	.	.	PUNCT
fumecheng-7594	215	1	it	it	PRON
fumecheng-7594	215	2	is	be	AUX
fumecheng-7594	215	3	noticed	notice	VERB
fumecheng-7594	215	4	that	that	SCONJ
fumecheng-7594	215	5	,	,	PUNCT
fumecheng-7594	215	6	for	for	ADP
fumecheng-7594	215	7	the	the	DET
fumecheng-7594	215	8	case	case	NOUN
fumecheng-7594	215	9	that	that	SCONJ
fumecheng-7594	215	10	the	the	DET
fumecheng-7594	215	11	radius	radius	NOUN
fumecheng-7594	215	12	of	of	ADP
fumecheng-7594	215	13	the	the	DET
fumecheng-7594	215	14	ruby	ruby	PROPN
fumecheng-7594	215	15	hemispheres	hemisphere	NOUN
fumecheng-7594	215	16	is	be	AUX
fumecheng-7594	215	17	of	of	ADP
fumecheng-7594	215	18	0.25𝑚𝑚	0.25𝑚𝑚	NOUN
fumecheng-7594	215	19	,	,	PUNCT
fumecheng-7594	215	20	the	the	DET
fumecheng-7594	215	21	maximal	maximal	ADJ
fumecheng-7594	215	22	level	level	NOUN
fumecheng-7594	215	23	of	of	ADP
fumecheng-7594	215	24	the	the	DET
fumecheng-7594	215	25	preload	preload	NOUN
fumecheng-7594	215	26	is	be	AUX
fumecheng-7594	215	27	only	only	ADV
fumecheng-7594	215	28	0.5𝑁.	0.5𝑁.	NUM
fumecheng-7594	215	29	simulations	simulation	NOUN
fumecheng-7594	215	30	with	with	ADP
fumecheng-7594	215	31	higher	high	ADJ
fumecheng-7594	215	32	levels	level	NOUN
fumecheng-7594	215	33	of	of	ADP
fumecheng-7594	215	34	the	the	DET
fumecheng-7594	215	35	preload	preload	NOUN
fumecheng-7594	215	36	would	would	AUX
fumecheng-7594	215	37	have	have	VERB
fumecheng-7594	215	38	no	no	DET
fumecheng-7594	215	39	meaning	meaning	NOUN
fumecheng-7594	215	40	since	since	SCONJ
fumecheng-7594	215	41	the	the	DET
fumecheng-7594	215	42	experimental	experimental	ADJ
fumecheng-7594	215	43	implementation	implementation	NOUN
fumecheng-7594	215	44	proves	prove	VERB
fumecheng-7594	215	45	that	that	SCONJ
fumecheng-7594	215	46	when	when	SCONJ
fumecheng-7594	215	47	the	the	DET
fumecheng-7594	215	48	preload	preload	NOUN
fumecheng-7594	215	49	level	level	NOUN
fumecheng-7594	215	50	is	be	AUX
fumecheng-7594	215	51	higher	high	ADJ
fumecheng-7594	215	52	than	than	ADP
fumecheng-7594	215	53	0.5𝑁	0.5𝑁	NOUN
fumecheng-7594	215	54	the	the	DET
fumecheng-7594	215	55	drive	drive	NOUN
fumecheng-7594	215	56	does	do	AUX
fumecheng-7594	215	57	not	not	PART
fumecheng-7594	215	58	work	work	VERB
fumecheng-7594	215	59	reliably	reliably	ADV
fumecheng-7594	215	60	anymore	anymore	ADV
fumecheng-7594	215	61	.	.	PUNCT
fumecheng-7594	216	1	table	table	NOUN
fumecheng-7594	216	2	3	3	NUM
fumecheng-7594	216	3	shows	show	VERB
fumecheng-7594	216	4	variations	variation	NOUN
fumecheng-7594	216	5	of	of	ADP
fumecheng-7594	216	6	simulation	simulation	NOUN
fumecheng-7594	216	7	parameters	parameter	NOUN
fumecheng-7594	216	8	caused	cause	VERB
fumecheng-7594	216	9	by	by	ADP
fumecheng-7594	216	10	the	the	DET
fumecheng-7594	216	11	fabrication	fabrication	NOUN
fumecheng-7594	216	12	and	and	CCONJ
fumecheng-7594	216	13	assembly	assembly	NOUN
fumecheng-7594	216	14	tolerance	tolerance	NOUN
fumecheng-7594	216	15	.	.	PUNCT
fumecheng-7594	217	1	in	in	ADP
fumecheng-7594	217	2	the	the	DET
fumecheng-7594	217	3	standard	standard	ADJ
fumecheng-7594	217	4	case	case	NOUN
fumecheng-7594	217	5	,	,	PUNCT
fumecheng-7594	217	6	on	on	ADP
fumecheng-7594	217	7	one	one	NUM
fumecheng-7594	217	8	side	side	NOUN
fumecheng-7594	217	9	of	of	ADP
fumecheng-7594	217	10	the	the	DET
fumecheng-7594	217	11	runner	runner	NOUN
fumecheng-7594	217	12	,	,	PUNCT
fumecheng-7594	217	13	the	the	DET
fumecheng-7594	217	14	angle	angle	NOUN
fumecheng-7594	217	15	between	between	ADP
fumecheng-7594	217	16	two	two	NUM
fumecheng-7594	217	17	actuator	actuator	NOUN
fumecheng-7594	217	18	blocks	block	NOUN
fumecheng-7594	217	19	𝛿	𝛿	ADJ
fumecheng-7594	217	20	and	and	CCONJ
fumecheng-7594	217	21	the	the	DET
fumecheng-7594	217	22	angle	angle	NOUN
fumecheng-7594	217	23	between	between	ADP
fumecheng-7594	217	24	two	two	NUM
fumecheng-7594	217	25	working	work	VERB
fumecheng-7594	217	26	surfaces	surface	NOUN
fumecheng-7594	217	27	of	of	ADP
fumecheng-7594	217	28	the	the	DET
fumecheng-7594	217	29	runner	runner	NOUN
fumecheng-7594	217	30	𝛾	𝛾	NOUN
fumecheng-7594	217	31	are	be	AUX
fumecheng-7594	217	32	equal	equal	ADJ
fumecheng-7594	217	33	to	to	ADP
fumecheng-7594	217	34	90	90	NUM
fumecheng-7594	217	35	°	°	NOUN
fumecheng-7594	217	36	(	(	PUNCT
fumecheng-7594	217	37	see	see	VERB
fumecheng-7594	217	38	figs	fig	NOUN
fumecheng-7594	217	39	.	.	PUNCT
fumecheng-7594	218	1	6b	6b	NOUN
fumecheng-7594	218	2	and	and	CCONJ
fumecheng-7594	218	3	7a	7a	NUM
fumecheng-7594	218	4	,	,	PUNCT
fumecheng-7594	218	5	b	b	NOUN
fumecheng-7594	218	6	)	)	PUNCT
fumecheng-7594	218	7	.	.	PUNCT
fumecheng-7594	219	1	if	if	SCONJ
fumecheng-7594	219	2	the	the	DET
fumecheng-7594	219	3	fabrication	fabrication	NOUN
fumecheng-7594	219	4	and	and	CCONJ
fumecheng-7594	219	5	assembly	assembly	NOUN
fumecheng-7594	219	6	tolerance	tolerance	NOUN
fumecheng-7594	219	7	are	be	AUX
fumecheng-7594	219	8	considered	consider	VERB
fumecheng-7594	219	9	,	,	PUNCT
fumecheng-7594	219	10	these	these	DET
fumecheng-7594	219	11	parameters	parameter	NOUN
fumecheng-7594	219	12	are	be	AUX
fumecheng-7594	219	13	varied	varied	ADJ
fumecheng-7594	219	14	according	accord	VERB
fumecheng-7594	219	15	to	to	ADP
fumecheng-7594	219	16	the	the	DET
fumecheng-7594	219	17	column	column	NOUN
fumecheng-7594	219	18	“	"	PUNCT
fumecheng-7594	219	19	varied	varied	ADJ
fumecheng-7594	219	20	value	value	NOUN
fumecheng-7594	219	21	”	"	PUNCT
fumecheng-7594	219	22	of	of	ADP
fumecheng-7594	219	23	table	table	NOUN
fumecheng-7594	219	24	3	3	NUM
fumecheng-7594	219	25	.	.	PUNCT
fumecheng-7594	220	1	because	because	SCONJ
fumecheng-7594	220	2	the	the	DET
fumecheng-7594	220	3	fabrication	fabrication	NOUN
fumecheng-7594	220	4	and	and	CCONJ
fumecheng-7594	220	5	assembly	assembly	NOUN
fumecheng-7594	220	6	tolerance	tolerance	NOUN
fumecheng-7594	220	7	are	be	AUX
fumecheng-7594	220	8	random	random	ADJ
fumecheng-7594	220	9	quantities	quantity	NOUN
fumecheng-7594	220	10	,	,	PUNCT
fumecheng-7594	220	11	values	value	NOUN
fumecheng-7594	220	12	of	of	ADP
fumecheng-7594	220	13	𝛿	𝛿	NOUN
fumecheng-7594	220	14	and	and	CCONJ
fumecheng-7594	220	15	𝛾	𝛾	NOUN
fumecheng-7594	220	16	can	can	AUX
fumecheng-7594	220	17	be	be	AUX
fumecheng-7594	220	18	smaller	small	ADJ
fumecheng-7594	220	19	or	or	CCONJ
fumecheng-7594	220	20	larger	large	ADJ
fumecheng-7594	220	21	than	than	ADP
fumecheng-7594	220	22	90	90	NUM
fumecheng-7594	220	23	°	°	NOUN
fumecheng-7594	220	24	.	.	PUNCT
fumecheng-7594	221	1	also	also	ADV
fumecheng-7594	221	2	,	,	PUNCT
fumecheng-7594	221	3	the	the	DET
fumecheng-7594	221	4	stiffness	stiffness	NOUN
fumecheng-7594	221	5	and	and	CCONJ
fumecheng-7594	221	6	the	the	DET
fumecheng-7594	221	7	damping	damp	VERB
fumecheng-7594	221	8	ratio	ratio	NOUN
fumecheng-7594	221	9	of	of	ADP
fumecheng-7594	221	10	the	the	DET
fumecheng-7594	221	11	actuators	actuator	NOUN
fumecheng-7594	221	12	are	be	AUX
fumecheng-7594	221	13	varied	varied	ADJ
fumecheng-7594	221	14	to	to	PART
fumecheng-7594	221	15	reduce	reduce	VERB
fumecheng-7594	221	16	to	to	ADP
fumecheng-7594	221	17	amounts	amount	NOUN
fumecheng-7594	221	18	of	of	ADP
fumecheng-7594	221	19	10	10	NUM
fumecheng-7594	221	20	%	%	NOUN
fumecheng-7594	221	21	and	and	CCONJ
fumecheng-7594	221	22	20	20	NUM
fumecheng-7594	221	23	%	%	NOUN
fumecheng-7594	221	24	,	,	PUNCT
fumecheng-7594	221	25	describing	describe	VERB
fumecheng-7594	221	26	for	for	ADP
fumecheng-7594	221	27	the	the	DET
fumecheng-7594	221	28	fabrication	fabrication	NOUN
fumecheng-7594	221	29	tolerance	tolerance	NOUN
fumecheng-7594	221	30	of	of	ADP
fumecheng-7594	221	31	the	the	DET
fumecheng-7594	221	32	piezo	piezo	NOUN
fumecheng-7594	221	33	and	and	CCONJ
fumecheng-7594	221	34	the	the	DET
fumecheng-7594	221	35	inequality	inequality	NOUN
fumecheng-7594	221	36	in	in	ADP
fumecheng-7594	221	37	the	the	DET
fumecheng-7594	221	38	thickness	thickness	NOUN
fumecheng-7594	221	39	of	of	ADP
fumecheng-7594	221	40	the	the	DET
fumecheng-7594	221	41	glue	glue	NOUN
fumecheng-7594	221	42	layer	layer	NOUN
fumecheng-7594	221	43	.	.	PUNCT
fumecheng-7594	222	1	based	base	VERB
fumecheng-7594	222	2	on	on	ADP
fumecheng-7594	222	3	these	these	DET
fumecheng-7594	222	4	varied	varied	ADJ
fumecheng-7594	222	5	parameters	parameter	NOUN
fumecheng-7594	222	6	,	,	PUNCT
fumecheng-7594	222	7	we	we	PRON
fumecheng-7594	222	8	perform	perform	VERB
fumecheng-7594	222	9	dynamic	dynamic	ADJ
fumecheng-7594	222	10	simulations	simulation	NOUN
fumecheng-7594	222	11	and	and	CCONJ
fumecheng-7594	222	12	compare	compare	VERB
fumecheng-7594	222	13	results	result	NOUN
fumecheng-7594	222	14	with	with	ADP
fumecheng-7594	222	15	that	that	PRON
fumecheng-7594	222	16	of	of	ADP
fumecheng-7594	222	17	the	the	DET
fumecheng-7594	222	18	standard	standard	ADJ
fumecheng-7594	222	19	case	case	NOUN
fumecheng-7594	222	20	.	.	PUNCT
fumecheng-7594	223	1	consequently	consequently	ADV
fumecheng-7594	223	2	,	,	PUNCT
fumecheng-7594	223	3	discrepancies	discrepancy	NOUN
fumecheng-7594	223	4	in	in	ADP
fumecheng-7594	223	5	percentage	percentage	NOUN
fumecheng-7594	223	6	between	between	ADP
fumecheng-7594	223	7	the	the	DET
fumecheng-7594	223	8	standard	standard	ADJ
fumecheng-7594	223	9	case	case	NOUN
fumecheng-7594	223	10	and	and	CCONJ
fumecheng-7594	223	11	the	the	DET
fumecheng-7594	223	12	varied	varied	ADJ
fumecheng-7594	223	13	cases	case	NOUN
fumecheng-7594	223	14	are	be	AUX
fumecheng-7594	223	15	calculated	calculate	VERB
fumecheng-7594	223	16	and	and	CCONJ
fumecheng-7594	223	17	presented	present	VERB
fumecheng-7594	223	18	.	.	PUNCT
fumecheng-7594	224	1	simulation	simulation	NOUN
fumecheng-7594	224	2	cases	case	NOUN
fumecheng-7594	224	3	are	be	AUX
fumecheng-7594	224	4	as	as	SCONJ
fumecheng-7594	224	5	follows	follow	VERB
fumecheng-7594	224	6	:	:	PUNCT
fumecheng-7594	224	7	▪	▪	ADJ
fumecheng-7594	224	8	case	case	NOUN
fumecheng-7594	224	9	1	1	NUM
fumecheng-7594	224	10	:	:	PUNCT
fumecheng-7594	224	11	the	the	DET
fumecheng-7594	224	12	angle	angle	NOUN
fumecheng-7594	224	13	between	between	ADP
fumecheng-7594	224	14	two	two	NUM
fumecheng-7594	224	15	actuator	actuator	NOUN
fumecheng-7594	224	16	blocks	block	NOUN
fumecheng-7594	224	17	on	on	ADP
fumecheng-7594	224	18	one	one	NUM
fumecheng-7594	224	19	side	side	NOUN
fumecheng-7594	224	20	of	of	ADP
fumecheng-7594	224	21	the	the	DET
fumecheng-7594	224	22	runner	runner	NOUN
fumecheng-7594	224	23	(	(	PUNCT
fumecheng-7594	224	24	𝛿	𝛿	ADJ
fumecheng-7594	224	25	)	)	PUNCT
fumecheng-7594	224	26	is	be	AUX
fumecheng-7594	224	27	varied	varied	ADJ
fumecheng-7594	224	28	.	.	PUNCT
fumecheng-7594	225	1	the	the	DET
fumecheng-7594	225	2	change	change	NOUN
fumecheng-7594	225	3	is	be	AUX
fumecheng-7594	225	4	assigned	assign	VERB
fumecheng-7594	225	5	to	to	ADP
fumecheng-7594	225	6	either	either	CCONJ
fumecheng-7594	225	7	type	type	VERB
fumecheng-7594	225	8	-	-	PUNCT
fumecheng-7594	225	9	a	a	DET
fumecheng-7594	225	10	side	side	NOUN
fumecheng-7594	225	11	or	or	CCONJ
fumecheng-7594	225	12	type	type	NOUN
fumecheng-7594	225	13	-	-	PUNCT
fumecheng-7594	225	14	b	b	NOUN
fumecheng-7594	225	15	side	side	NOUN
fumecheng-7594	225	16	;	;	PUNCT
fumecheng-7594	225	17	▪	▪	ADJ
fumecheng-7594	225	18	case	case	NOUN
fumecheng-7594	225	19	2	2	NUM
fumecheng-7594	225	20	:	:	PUNCT
fumecheng-7594	225	21	the	the	DET
fumecheng-7594	225	22	angle	angle	NOUN
fumecheng-7594	225	23	between	between	ADP
fumecheng-7594	225	24	two	two	NUM
fumecheng-7594	225	25	working	work	VERB
fumecheng-7594	225	26	surfaces	surface	NOUN
fumecheng-7594	225	27	on	on	ADP
fumecheng-7594	225	28	one	one	NUM
fumecheng-7594	225	29	side	side	NOUN
fumecheng-7594	225	30	of	of	ADP
fumecheng-7594	225	31	the	the	DET
fumecheng-7594	225	32	runner	runner	NOUN
fumecheng-7594	225	33	(	(	PUNCT
fumecheng-7594	225	34	𝛾	𝛾	NOUN
fumecheng-7594	225	35	)	)	PUNCT
fumecheng-7594	225	36	is	be	AUX
fumecheng-7594	225	37	varied	varied	ADJ
fumecheng-7594	225	38	and	and	CCONJ
fumecheng-7594	225	39	the	the	DET
fumecheng-7594	225	40	change	change	NOUN
fumecheng-7594	225	41	can	can	AUX
fumecheng-7594	225	42	happen	happen	VERB
fumecheng-7594	225	43	either	either	CCONJ
fumecheng-7594	225	44	on	on	ADP
fumecheng-7594	225	45	type	type	NOUN
fumecheng-7594	225	46	-	-	PUNCT
fumecheng-7594	225	47	a	a	DET
fumecheng-7594	225	48	side	side	NOUN
fumecheng-7594	225	49	or	or	CCONJ
fumecheng-7594	225	50	type	type	NOUN
fumecheng-7594	225	51	-	-	PUNCT
fumecheng-7594	225	52	b	b	NOUN
fumecheng-7594	225	53	side	side	NOUN
fumecheng-7594	225	54	;	;	PUNCT
fumecheng-7594	225	55	▪	▪	ADJ
fumecheng-7594	225	56	case	case	NOUN
fumecheng-7594	225	57	3	3	X
fumecheng-7594	225	58	:	:	PUNCT
fumecheng-7594	225	59	the	the	DET
fumecheng-7594	225	60	stiffness	stiffness	NOUN
fumecheng-7594	225	61	and	and	CCONJ
fumecheng-7594	225	62	damping	damp	VERB
fumecheng-7594	225	63	ratio	ratio	NOUN
fumecheng-7594	225	64	of	of	ADP
fumecheng-7594	225	65	actuators	actuator	NOUN
fumecheng-7594	225	66	in	in	ADP
fumecheng-7594	225	67	one	one	NUM
fumecheng-7594	225	68	group	group	NOUN
fumecheng-7594	225	69	(	(	PUNCT
fumecheng-7594	225	70	either	either	CCONJ
fumecheng-7594	225	71	the	the	DET
fumecheng-7594	225	72	typea	typea	NOUN
fumecheng-7594	225	73	group	group	NOUN
fumecheng-7594	225	74	with	with	ADP
fumecheng-7594	225	75	four	four	NUM
fumecheng-7594	225	76	actuators	actuator	NOUN
fumecheng-7594	225	77	or	or	CCONJ
fumecheng-7594	225	78	the	the	DET
fumecheng-7594	225	79	type	type	NOUN
fumecheng-7594	225	80	-	-	PUNCT
fumecheng-7594	225	81	b	b	NOUN
fumecheng-7594	225	82	group	group	NOUN
fumecheng-7594	225	83	with	with	ADP
fumecheng-7594	225	84	two	two	NUM
fumecheng-7594	225	85	actuators	actuator	NOUN
fumecheng-7594	225	86	)	)	PUNCT
fumecheng-7594	225	87	are	be	AUX
fumecheng-7594	225	88	varied	varied	ADJ
fumecheng-7594	225	89	to	to	PART
fumecheng-7594	225	90	reduce	reduce	VERB
fumecheng-7594	225	91	.	.	PUNCT
fumecheng-7594	226	1	other	other	ADJ
fumecheng-7594	226	2	parameters	parameter	NOUN
fumecheng-7594	226	3	remain	remain	VERB
fumecheng-7594	226	4	unchanged	unchanged	ADJ
fumecheng-7594	226	5	.	.	PUNCT
fumecheng-7594	227	1	table	table	NOUN
fumecheng-7594	227	2	1	1	NUM
fumecheng-7594	227	3	data	datum	NOUN
fumecheng-7594	227	4	used	use	VERB
fumecheng-7594	227	5	for	for	ADP
fumecheng-7594	227	6	numerical	numerical	ADJ
fumecheng-7594	227	7	simulations	simulation	NOUN
fumecheng-7594	227	8	[	[	X
fumecheng-7594	227	9	10	10	NUM
fumecheng-7594	227	10	,	,	PUNCT
fumecheng-7594	227	11	20	20	NUM
fumecheng-7594	227	12	]	]	PUNCT
fumecheng-7594	227	13	parameters	parameter	NOUN
fumecheng-7594	227	14	value	value	VERB
fumecheng-7594	227	15	young	young	PROPN
fumecheng-7594	227	16	's	's	PART
fumecheng-7594	227	17	modulus	modulus	ADJ
fumecheng-7594	227	18	ruby	ruby	PROPN
fumecheng-7594	227	19	𝐸1	𝐸1	PROPN
fumecheng-7594	227	20	(	(	PUNCT
fumecheng-7594	227	21	𝐺𝑃𝑎	𝐺𝑃𝑎	ADJ
fumecheng-7594	227	22	)	)	PUNCT
fumecheng-7594	227	23	370	370	NUM
fumecheng-7594	227	24	young	young	ADJ
fumecheng-7594	227	25	's	's	PART
fumecheng-7594	227	26	modulus	modulus	ADJ
fumecheng-7594	227	27	steel	steel	NOUN
fumecheng-7594	227	28	𝐸2	𝐸2	NOUN
fumecheng-7594	227	29	(	(	PUNCT
fumecheng-7594	227	30	𝐺𝑃𝑎	𝐺𝑃𝑎	ADJ
fumecheng-7594	227	31	)	)	PUNCT
fumecheng-7594	227	32	210	210	NUM
fumecheng-7594	227	33	poisson	poisson	NOUN
fumecheng-7594	227	34	's	's	PART
fumecheng-7594	227	35	ratio	ratio	NOUN
fumecheng-7594	227	36	𝜈1	𝜈1	NOUN
fumecheng-7594	227	37	,	,	PUNCT
fumecheng-7594	227	38	𝜈2	𝜈2	VERB
fumecheng-7594	227	39	0.33	0.33	NUM
fumecheng-7594	227	40	friction	friction	NOUN
fumecheng-7594	227	41	coefficient	coefficient	NOUN
fumecheng-7594	227	42	µ	µ	PRON
fumecheng-7594	227	43	0.3	0.3	NUM
fumecheng-7594	227	44	mass	mass	NOUN
fumecheng-7594	227	45	of	of	ADP
fumecheng-7594	227	46	the	the	DET
fumecheng-7594	227	47	runner	runner	NOUN
fumecheng-7594	227	48	𝑚𝑟	𝑚𝑟	PROPN
fumecheng-7594	227	49	(	(	PUNCT
fumecheng-7594	227	50	𝑔	𝑔	NOUN
fumecheng-7594	227	51	)	)	PUNCT
fumecheng-7594	227	52	3	3	NUM
fumecheng-7594	227	53	stiffness	stiffness	NOUN
fumecheng-7594	227	54	of	of	ADP
fumecheng-7594	227	55	the	the	DET
fumecheng-7594	227	56	load	load	NOUN
fumecheng-7594	227	57	cell	cell	NOUN
fumecheng-7594	227	58	𝑘	𝑘	PROPN
fumecheng-7594	227	59	(	(	PUNCT
fumecheng-7594	227	60	𝑁/𝑚	𝑁/𝑚	PROPN
fumecheng-7594	227	61	)	)	PUNCT
fumecheng-7594	227	62	2.5	2.5	NUM
fumecheng-7594	227	63	×	×	NOUN
fumecheng-7594	227	64	104	104	NUM
fumecheng-7594	227	65	radius	radius	NOUN
fumecheng-7594	227	66	of	of	ADP
fumecheng-7594	227	67	the	the	DET
fumecheng-7594	227	68	ruby	ruby	PROPN
fumecheng-7594	227	69	hemispheres	hemispheres	PROPN
fumecheng-7594	227	70	𝑅	𝑅	PROPN
fumecheng-7594	227	71	(	(	PUNCT
fumecheng-7594	227	72	𝑚𝑚	𝑚𝑚	NOUN
fumecheng-7594	227	73	)	)	PUNCT
fumecheng-7594	227	74	0.25	0.25	NUM
fumecheng-7594	227	75	,	,	PUNCT
fumecheng-7594	227	76	0.5	0.5	NUM
fumecheng-7594	227	77	,	,	PUNCT
fumecheng-7594	227	78	1	1	NUM
fumecheng-7594	227	79	120	120	NUM
fumecheng-7594	227	80	h.	h.	NOUN
fumecheng-7594	227	81	x.	x.	PROPN
fumecheng-7594	227	82	nguyen	nguyen	PROPN
fumecheng-7594	227	83	,	,	PUNCT
fumecheng-7594	227	84	a.	a.	PROPN
fumecheng-7594	227	85	h.	h.	PROPN
fumecheng-7594	227	86	nguyen	nguyen	PROPN
fumecheng-7594	227	87	table	table	NOUN
fumecheng-7594	227	88	2	2	NUM
fumecheng-7594	227	89	standard	standard	ADJ
fumecheng-7594	227	90	parameters	parameter	NOUN
fumecheng-7594	227	91	dependent	dependent	ADJ
fumecheng-7594	227	92	on	on	ADP
fumecheng-7594	227	93	the	the	DET
fumecheng-7594	227	94	radius	radius	NOUN
fumecheng-7594	227	95	of	of	ADP
fumecheng-7594	227	96	hemispheres	hemisphere	NOUN
fumecheng-7594	227	97	used	use	VERB
fumecheng-7594	227	98	in	in	ADP
fumecheng-7594	227	99	simulations	simulation	NOUN
fumecheng-7594	227	100	[	[	X
fumecheng-7594	227	101	20	20	NUM
fumecheng-7594	227	102	]	]	PUNCT
fumecheng-7594	227	103	parameters	parameter	NOUN
fumecheng-7594	227	104	𝑅	𝑅	NOUN
fumecheng-7594	227	105	=	=	PROPN
fumecheng-7594	227	106	0.25	0.25	NUM
fumecheng-7594	227	107	𝑚𝑚	𝑚𝑚	ADP
fumecheng-7594	227	108	𝑅	𝑅	PROPN
fumecheng-7594	227	109	=	=	PROPN
fumecheng-7594	227	110	0.5𝑚𝑚	0.5𝑚𝑚	PROPN
fumecheng-7594	227	111	𝑅	𝑅	PROPN
fumecheng-7594	227	112	=	=	PUNCT
fumecheng-7594	227	113	1𝑚𝑚	1𝑚𝑚	ADJ
fumecheng-7594	227	114	stiffness	stiffness	NOUN
fumecheng-7594	227	115	of	of	ADP
fumecheng-7594	227	116	actuators	actuator	NOUN
fumecheng-7594	227	117	𝑘𝑝	𝑘𝑝	ADP
fumecheng-7594	227	118	(	(	PUNCT
fumecheng-7594	227	119	𝑁/𝑚	𝑁/𝑚	PROPN
fumecheng-7594	227	120	)	)	PUNCT
fumecheng-7594	227	121	4	4	NUM
fumecheng-7594	227	122	×	×	NOUN
fumecheng-7594	227	123	106	106	NUM
fumecheng-7594	227	124	6	6	NUM
fumecheng-7594	227	125	×	×	NOUN
fumecheng-7594	227	126	106	106	NUM
fumecheng-7594	227	127	6.5	6.5	NUM
fumecheng-7594	227	128	×	×	NOUN
fumecheng-7594	227	129	106	106	NUM
fumecheng-7594	227	130	damping	damp	VERB
fumecheng-7594	227	131	ratio	ratio	NOUN
fumecheng-7594	227	132	𝑐𝑝	𝑐𝑝	ADP
fumecheng-7594	227	133	(	(	PUNCT
fumecheng-7594	227	134	𝑘𝑔/𝑠	𝑘𝑔/𝑠	PROPN
fumecheng-7594	227	135	)	)	PUNCT
fumecheng-7594	227	136	10	10	NUM
fumecheng-7594	227	137	14	14	NUM
fumecheng-7594	227	138	16.3	16.3	NUM
fumecheng-7594	227	139	mass	mass	NOUN
fumecheng-7594	227	140	of	of	ADP
fumecheng-7594	227	141	actuator	actuator	NOUN
fumecheng-7594	227	142	𝑚𝑎	𝑚𝑎	ADP
fumecheng-7594	227	143	(	(	PUNCT
fumecheng-7594	227	144	𝑔	𝑔	NOUN
fumecheng-7594	227	145	)	)	PUNCT
fumecheng-7594	227	146	1.1	1.1	NUM
fumecheng-7594	227	147	×	×	NOUN
fumecheng-7594	227	148	10−5	10−5	NUM
fumecheng-7594	227	149	1.6	1.6	NUM
fumecheng-7594	227	150	×	×	NOUN
fumecheng-7594	227	151	10−5	10−5	NUM
fumecheng-7594	227	152	2.2	2.2	NUM
fumecheng-7594	227	153	×	×	NOUN
fumecheng-7594	227	154	10−5	10−5	NUM
fumecheng-7594	227	155	preload	preload	NOUN
fumecheng-7594	227	156	range	range	NOUN
fumecheng-7594	227	157	𝐹𝑝	𝐹𝑝	PROPN
fumecheng-7594	227	158	(	(	PUNCT
fumecheng-7594	227	159	𝑁	𝑁	PROPN
fumecheng-7594	227	160	)	)	PUNCT
fumecheng-7594	227	161	0.1	0.1	NUM
fumecheng-7594	227	162	÷	÷	NUM
fumecheng-7594	227	163	0.5	0.5	NUM
fumecheng-7594	227	164	0.1	0.1	NUM
fumecheng-7594	227	165	÷	÷	NUM
fumecheng-7594	227	166	0.8	0.8	NUM
fumecheng-7594	227	167	0.1	0.1	NUM
fumecheng-7594	227	168	÷	÷	NUM
fumecheng-7594	227	169	1.5	1.5	NUM
fumecheng-7594	227	170	actuation	actuation	NOUN
fumecheng-7594	227	171	amplitude	amplitude	NOUN
fumecheng-7594	227	172	𝐴	𝐴	PROPN
fumecheng-7594	227	173	(	(	PUNCT
fumecheng-7594	227	174	𝑛𝑚	𝑛𝑚	NOUN
fumecheng-7594	227	175	)	)	PUNCT
fumecheng-7594	227	176	96	96	NUM
fumecheng-7594	227	177	160	160	NUM
fumecheng-7594	227	178	200	200	NUM
fumecheng-7594	227	179	table	table	NOUN
fumecheng-7594	227	180	3	3	NUM
fumecheng-7594	227	181	parameter	parameter	NOUN
fumecheng-7594	227	182	variation	variation	NOUN
fumecheng-7594	227	183	depending	depend	VERB
fumecheng-7594	227	184	on	on	ADP
fumecheng-7594	227	185	the	the	DET
fumecheng-7594	227	186	fabrication	fabrication	NOUN
fumecheng-7594	227	187	and	and	CCONJ
fumecheng-7594	227	188	assembly	assembly	NOUN
fumecheng-7594	227	189	tolerance	tolerance	NOUN
fumecheng-7594	227	190	parameter	parameter	NOUN
fumecheng-7594	227	191	position	position	NOUN
fumecheng-7594	227	192	standard	standard	ADJ
fumecheng-7594	227	193	value	value	NOUN
fumecheng-7594	227	194	varied	varied	ADJ
fumecheng-7594	227	195	value	value	NOUN
fumecheng-7594	227	196	angle	angle	NOUN
fumecheng-7594	227	197	between	between	ADP
fumecheng-7594	227	198	two	two	NUM
fumecheng-7594	227	199	actuator	actuator	NOUN
fumecheng-7594	227	200	blocks	block	NOUN
fumecheng-7594	227	201	on	on	ADP
fumecheng-7594	227	202	one	one	NUM
fumecheng-7594	227	203	side	side	NOUN
fumecheng-7594	227	204	of	of	ADP
fumecheng-7594	227	205	the	the	DET
fumecheng-7594	227	206	runner	runner	NOUN
fumecheng-7594	227	207	(	(	PUNCT
fumecheng-7594	227	208	𝛿	𝛿	ADJ
fumecheng-7594	227	209	)	)	PUNCT
fumecheng-7594	227	210	type	type	NOUN
fumecheng-7594	227	211	-	-	PUNCT
fumecheng-7594	227	212	a	a	DET
fumecheng-7594	227	213	side	side	NOUN
fumecheng-7594	227	214	type	type	NOUN
fumecheng-7594	227	215	-	-	PUNCT
fumecheng-7594	227	216	b	b	NOUN
fumecheng-7594	227	217	side	side	NOUN
fumecheng-7594	227	218	𝛿	𝛿	NOUN
fumecheng-7594	227	219	=	=	PROPN
fumecheng-7594	227	220	90	90	NUM
fumecheng-7594	227	221	°	°	NUM
fumecheng-7594	227	222	𝛿	𝛿	ADJ
fumecheng-7594	227	223	=	=	NUM
fumecheng-7594	227	224	80	80	NUM
fumecheng-7594	227	225	°	°	NOUN
fumecheng-7594	227	226	/100	/100	NOUN
fumecheng-7594	227	227	°	°	PROPN
fumecheng-7594	227	228	,	,	PUNCT
fumecheng-7594	227	229	70	70	NUM
fumecheng-7594	227	230	°	°	ADJ
fumecheng-7594	227	231	/110	/110	NOUN
fumecheng-7594	227	232	°	°	PROPN
fumecheng-7594	227	233	angle	angle	NOUN
fumecheng-7594	227	234	between	between	ADP
fumecheng-7594	227	235	two	two	NUM
fumecheng-7594	227	236	working	work	VERB
fumecheng-7594	227	237	surfaces	surface	NOUN
fumecheng-7594	227	238	on	on	ADP
fumecheng-7594	227	239	one	one	NUM
fumecheng-7594	227	240	side	side	NOUN
fumecheng-7594	227	241	of	of	ADP
fumecheng-7594	227	242	the	the	DET
fumecheng-7594	227	243	runner	runner	NOUN
fumecheng-7594	227	244	(	(	PUNCT
fumecheng-7594	227	245	𝛾	𝛾	NOUN
fumecheng-7594	227	246	)	)	PUNCT
fumecheng-7594	227	247	type	type	NOUN
fumecheng-7594	227	248	-	-	PUNCT
fumecheng-7594	227	249	a	a	DET
fumecheng-7594	227	250	side	side	NOUN
fumecheng-7594	227	251	type	type	NOUN
fumecheng-7594	227	252	-	-	PUNCT
fumecheng-7594	227	253	b	b	NOUN
fumecheng-7594	227	254	side	side	NOUN
fumecheng-7594	227	255	𝛾	𝛾	NOUN
fumecheng-7594	227	256	=	=	NOUN
fumecheng-7594	227	257	90	90	NUM
fumecheng-7594	227	258	°	°	NOUN
fumecheng-7594	227	259	𝛾	𝛾	ADP
fumecheng-7594	227	260	=	=	SYM
fumecheng-7594	227	261	85	85	NUM
fumecheng-7594	227	262	°	°	NUM
fumecheng-7594	227	263	,	,	PUNCT
fumecheng-7594	227	264	95	95	NUM
fumecheng-7594	227	265	°	°	NOUN
fumecheng-7594	227	266	stiffness	stiffness	NOUN
fumecheng-7594	227	267	and	and	CCONJ
fumecheng-7594	227	268	damping	damp	VERB
fumecheng-7594	227	269	of	of	ADP
fumecheng-7594	227	270	the	the	DET
fumecheng-7594	227	271	actuators	actuator	NOUN
fumecheng-7594	227	272	(	(	PUNCT
fumecheng-7594	227	273	𝑘𝑝	𝑘𝑝	INTJ
fumecheng-7594	227	274	,	,	PUNCT
fumecheng-7594	227	275	𝑐𝑝	𝑐𝑝	PROPN
fumecheng-7594	227	276	)	)	PUNCT
fumecheng-7594	227	277	actuator	actuator	NOUN
fumecheng-7594	227	278	1	1	NUM
fumecheng-7594	227	279	,	,	PUNCT
fumecheng-7594	227	280	2	2	NUM
fumecheng-7594	227	281	actuator	actuator	NOUN
fumecheng-7594	227	282	3	3	NUM
fumecheng-7594	227	283	,	,	PUNCT
fumecheng-7594	227	284	4	4	NUM
fumecheng-7594	227	285	,	,	PUNCT
fumecheng-7594	227	286	5	5	NUM
fumecheng-7594	227	287	,	,	PUNCT
fumecheng-7594	227	288	6	6	NUM
fumecheng-7594	227	289	from	from	ADP
fumecheng-7594	227	290	that	that	PRON
fumecheng-7594	227	291	of	of	ADP
fumecheng-7594	227	292	table	table	NOUN
fumecheng-7594	227	293	2	2	NUM
fumecheng-7594	227	294	𝑘𝑝	𝑘𝑝	NOUN
fumecheng-7594	227	295	,	,	PUNCT
fumecheng-7594	227	296	𝑐𝑝	𝑐𝑝	SCONJ
fumecheng-7594	227	297	reduced	reduce	VERB
fumecheng-7594	227	298	10	10	NUM
fumecheng-7594	227	299	%	%	NOUN
fumecheng-7594	227	300	𝑘𝑝	𝑘𝑝	ADP
fumecheng-7594	227	301	,	,	PUNCT
fumecheng-7594	227	302	𝑐𝑝	𝑐𝑝	SCONJ
fumecheng-7594	227	303	reduced	reduce	VERB
fumecheng-7594	227	304	20	20	NUM
fumecheng-7594	227	305	%	%	NOUN
fumecheng-7594	227	306	4	4	NUM
fumecheng-7594	227	307	.	.	NOUN
fumecheng-7594	227	308	results	result	NOUN
fumecheng-7594	227	309	and	and	CCONJ
fumecheng-7594	227	310	discussion	discussion	NOUN
fumecheng-7594	227	311	in	in	ADP
fumecheng-7594	227	312	this	this	DET
fumecheng-7594	227	313	section	section	NOUN
fumecheng-7594	227	314	,	,	PUNCT
fumecheng-7594	227	315	the	the	DET
fumecheng-7594	227	316	operational	operational	ADJ
fumecheng-7594	227	317	characteristics	characteristic	NOUN
fumecheng-7594	227	318	of	of	ADP
fumecheng-7594	227	319	the	the	DET
fumecheng-7594	227	320	drive	drive	NOUN
fumecheng-7594	227	321	including	include	VERB
fumecheng-7594	227	322	the	the	DET
fumecheng-7594	227	323	repeatability	repeatability	NOUN
fumecheng-7594	227	324	of	of	ADP
fumecheng-7594	227	325	the	the	DET
fumecheng-7594	227	326	step	step	NOUN
fumecheng-7594	227	327	length	length	NOUN
fumecheng-7594	227	328	,	,	PUNCT
fumecheng-7594	227	329	the	the	DET
fumecheng-7594	227	330	critical/0	critical/0	ADJ
fumecheng-7594	227	331	-	-	PUNCT
fumecheng-7594	227	332	amplitude	amplitude	NOUN
fumecheng-7594	227	333	phenomenon	phenomenon	NOUN
fumecheng-7594	227	334	,	,	PUNCT
fumecheng-7594	227	335	and	and	CCONJ
fumecheng-7594	227	336	the	the	DET
fumecheng-7594	227	337	maximal	maximal	ADJ
fumecheng-7594	227	338	achievable	achievable	ADJ
fumecheng-7594	227	339	driving	drive	VERB
fumecheng-7594	227	340	frequency	frequency	NOUN
fumecheng-7594	227	341	/	/	SYM
fumecheng-7594	227	342	velocity	velocity	NOUN
fumecheng-7594	227	343	are	be	AUX
fumecheng-7594	227	344	analyzed	analyze	VERB
fumecheng-7594	227	345	.	.	PUNCT
fumecheng-7594	228	1	based	base	VERB
fumecheng-7594	228	2	on	on	ADP
fumecheng-7594	228	3	the	the	DET
fumecheng-7594	228	4	simulation	simulation	NOUN
fumecheng-7594	228	5	results	result	NOUN
fumecheng-7594	228	6	,	,	PUNCT
fumecheng-7594	228	7	discrepancies	discrepancy	NOUN
fumecheng-7594	228	8	are	be	AUX
fumecheng-7594	228	9	shown	show	VERB
fumecheng-7594	228	10	and	and	CCONJ
fumecheng-7594	228	11	discussed	discuss	VERB
fumecheng-7594	228	12	.	.	PUNCT
fumecheng-7594	229	1	also	also	ADV
fumecheng-7594	229	2	,	,	PUNCT
fumecheng-7594	229	3	some	some	DET
fumecheng-7594	229	4	analytical	analytical	ADJ
fumecheng-7594	229	5	formulations	formulation	NOUN
fumecheng-7594	229	6	are	be	AUX
fumecheng-7594	229	7	presented	present	VERB
fumecheng-7594	229	8	.	.	PUNCT
fumecheng-7594	230	1	4.1	4.1	NUM
fumecheng-7594	230	2	.	.	PUNCT
fumecheng-7594	231	1	the	the	DET
fumecheng-7594	231	2	repeatability	repeatability	NOUN
fumecheng-7594	231	3	of	of	ADP
fumecheng-7594	231	4	the	the	DET
fumecheng-7594	231	5	step	step	NOUN
fumecheng-7594	231	6	length	length	NOUN
fumecheng-7594	231	7	discrepancies	discrepancy	NOUN
fumecheng-7594	231	8	of	of	ADP
fumecheng-7594	231	9	the	the	DET
fumecheng-7594	231	10	step	step	NOUN
fumecheng-7594	231	11	length	length	NOUN
fumecheng-7594	231	12	depending	depend	VERB
fumecheng-7594	231	13	on	on	ADP
fumecheng-7594	231	14	the	the	DET
fumecheng-7594	231	15	preload	preload	NOUN
fumecheng-7594	231	16	when	when	SCONJ
fumecheng-7594	231	17	comparing	compare	VERB
fumecheng-7594	231	18	the	the	DET
fumecheng-7594	231	19	simulation	simulation	NOUN
fumecheng-7594	231	20	results	result	NOUN
fumecheng-7594	231	21	of	of	ADP
fumecheng-7594	231	22	the	the	DET
fumecheng-7594	231	23	standard	standard	ADJ
fumecheng-7594	231	24	case	case	NOUN
fumecheng-7594	231	25	with	with	ADP
fumecheng-7594	231	26	the	the	DET
fumecheng-7594	231	27	varied	varied	ADJ
fumecheng-7594	231	28	cases	case	NOUN
fumecheng-7594	231	29	(	(	PUNCT
fumecheng-7594	231	30	changing	change	VERB
fumecheng-7594	231	31	of	of	ADP
fumecheng-7594	231	32	𝛿	𝛿	NOUN
fumecheng-7594	231	33	and	and	CCONJ
fumecheng-7594	231	34	𝛾	𝛾	NOUN
fumecheng-7594	231	35	)	)	PUNCT
fumecheng-7594	231	36	are	be	AUX
fumecheng-7594	231	37	shown	show	VERB
fumecheng-7594	231	38	in	in	ADP
fumecheng-7594	231	39	fig	fig	NOUN
fumecheng-7594	231	40	.	.	PUNCT
fumecheng-7594	232	1	9	9	NUM
fumecheng-7594	232	2	.	.	NUM
fumecheng-7594	232	3	,	,	PUNCT
fumecheng-7594	232	4	where	where	SCONJ
fumecheng-7594	232	5	fig	fig	NOUN
fumecheng-7594	232	6	.	.	PUNCT
fumecheng-7594	233	1	9a	9a	NOUN
fumecheng-7594	233	2	is	be	AUX
fumecheng-7594	233	3	for	for	ADP
fumecheng-7594	233	4	the	the	DET
fumecheng-7594	233	5	case	case	NOUN
fumecheng-7594	233	6	radius	radius	NOUN
fumecheng-7594	233	7	of	of	ADP
fumecheng-7594	233	8	the	the	DET
fumecheng-7594	233	9	ruby	ruby	PROPN
fumecheng-7594	233	10	hemispheres	hemisphere	NOUN
fumecheng-7594	233	11	𝑅	𝑅	PROPN
fumecheng-7594	233	12	=	=	PROPN
fumecheng-7594	233	13	1𝑚𝑚	1𝑚𝑚	NOUN
fumecheng-7594	233	14	and	and	CCONJ
fumecheng-7594	233	15	fig	fig	NOUN
fumecheng-7594	233	16	.	.	PUNCT
fumecheng-7594	234	1	9b	9b	PROPN
fumecheng-7594	234	2	for	for	ADP
fumecheng-7594	234	3	𝑅	𝑅	PROPN
fumecheng-7594	234	4	=	=	PROPN
fumecheng-7594	234	5	0.25𝑚𝑚.	0.25𝑚𝑚.	PROPN
fumecheng-7594	234	6	it	it	PRON
fumecheng-7594	234	7	is	be	AUX
fumecheng-7594	234	8	seen	see	VERB
fumecheng-7594	234	9	in	in	ADP
fumecheng-7594	234	10	fig	fig	NOUN
fumecheng-7594	234	11	.	.	PUNCT
fumecheng-7594	235	1	9a	9a	NOUN
fumecheng-7594	235	2	that	that	SCONJ
fumecheng-7594	235	3	if	if	SCONJ
fumecheng-7594	235	4	𝛾	𝛾	NOUN
fumecheng-7594	235	5	or	or	CCONJ
fumecheng-7594	235	6	𝛿	𝛿	ADJ
fumecheng-7594	235	7	is	be	AUX
fumecheng-7594	235	8	varied	varied	ADJ
fumecheng-7594	235	9	,	,	PUNCT
fumecheng-7594	235	10	the	the	DET
fumecheng-7594	235	11	discrepancy	discrepancy	NOUN
fumecheng-7594	235	12	is	be	AUX
fumecheng-7594	235	13	increased	increase	VERB
fumecheng-7594	235	14	with	with	ADP
fumecheng-7594	235	15	the	the	DET
fumecheng-7594	235	16	rising	rise	VERB
fumecheng-7594	235	17	level	level	NOUN
fumecheng-7594	235	18	of	of	ADP
fumecheng-7594	235	19	the	the	DET
fumecheng-7594	235	20	preload	preload	NOUN
fumecheng-7594	235	21	.	.	PUNCT
fumecheng-7594	236	1	when	when	SCONJ
fumecheng-7594	236	2	the	the	DET
fumecheng-7594	236	3	preload	preload	NOUN
fumecheng-7594	236	4	is	be	AUX
fumecheng-7594	236	5	small	small	ADJ
fumecheng-7594	236	6	,	,	PUNCT
fumecheng-7594	236	7	the	the	DET
fumecheng-7594	236	8	discrepancy	discrepancy	NOUN
fumecheng-7594	236	9	is	be	AUX
fumecheng-7594	236	10	very	very	ADV
fumecheng-7594	236	11	low	low	ADJ
fumecheng-7594	236	12	and	and	CCONJ
fumecheng-7594	236	13	can	can	AUX
fumecheng-7594	236	14	be	be	AUX
fumecheng-7594	236	15	neglected	neglect	VERB
fumecheng-7594	236	16	.	.	PUNCT
fumecheng-7594	237	1	however	however	ADV
fumecheng-7594	237	2	,	,	PUNCT
fumecheng-7594	237	3	when	when	SCONJ
fumecheng-7594	237	4	the	the	DET
fumecheng-7594	237	5	preload	preload	NOUN
fumecheng-7594	237	6	becomes	become	VERB
fumecheng-7594	237	7	higher	high	ADJ
fumecheng-7594	237	8	,	,	PUNCT
fumecheng-7594	237	9	for	for	ADP
fumecheng-7594	237	10	example	example	NOUN
fumecheng-7594	237	11	,	,	PUNCT
fumecheng-7594	237	12	1.5𝑁	1.5𝑁	NUM
fumecheng-7594	237	13	,	,	PUNCT
fumecheng-7594	237	14	the	the	DET
fumecheng-7594	237	15	maximum	maximum	ADJ
fumecheng-7594	237	16	discrepancy	discrepancy	NOUN
fumecheng-7594	237	17	reaches	reach	VERB
fumecheng-7594	237	18	7.5	7.5	NUM
fumecheng-7594	237	19	%	%	NOUN
fumecheng-7594	237	20	.	.	PUNCT
fumecheng-7594	238	1	it	it	PRON
fumecheng-7594	238	2	is	be	AUX
fumecheng-7594	238	3	also	also	ADV
fumecheng-7594	238	4	clear	clear	ADJ
fumecheng-7594	238	5	that	that	SCONJ
fumecheng-7594	238	6	the	the	DET
fumecheng-7594	238	7	influence	influence	NOUN
fumecheng-7594	238	8	of	of	ADP
fumecheng-7594	238	9	𝛾	𝛾	PROPN
fumecheng-7594	238	10	is	be	AUX
fumecheng-7594	238	11	larger	large	ADJ
fumecheng-7594	238	12	than	than	ADP
fumecheng-7594	238	13	that	that	PRON
fumecheng-7594	238	14	of	of	ADP
fumecheng-7594	238	15	𝛿	𝛿	NOUN
fumecheng-7594	238	16	because	because	SCONJ
fumecheng-7594	238	17	the	the	DET
fumecheng-7594	238	18	changing	changing	NOUN
fumecheng-7594	238	19	of	of	ADP
fumecheng-7594	238	20	𝛾	𝛾	NOUN
fumecheng-7594	238	21	leads	lead	VERB
fumecheng-7594	238	22	to	to	ADP
fumecheng-7594	238	23	a	a	DET
fumecheng-7594	238	24	change	change	NOUN
fumecheng-7594	238	25	in	in	ADP
fumecheng-7594	238	26	both	both	CCONJ
fumecheng-7594	238	27	the	the	DET
fumecheng-7594	238	28	actuation	actuation	NOUN
fumecheng-7594	238	29	amplitude	amplitude	NOUN
fumecheng-7594	238	30	and	and	CCONJ
fumecheng-7594	238	31	the	the	DET
fumecheng-7594	238	32	normal	normal	ADJ
fumecheng-7594	238	33	force	force	NOUN
fumecheng-7594	238	34	,	,	PUNCT
fumecheng-7594	238	35	while	while	SCONJ
fumecheng-7594	238	36	the	the	DET
fumecheng-7594	238	37	changing	changing	NOUN
fumecheng-7594	238	38	of	of	ADP
fumecheng-7594	238	39	𝛿	𝛿	ADJ
fumecheng-7594	238	40	changes	change	NOUN
fumecheng-7594	238	41	only	only	ADV
fumecheng-7594	238	42	the	the	DET
fumecheng-7594	238	43	actuation	actuation	NOUN
fumecheng-7594	238	44	amplitude	amplitude	NOUN
fumecheng-7594	238	45	.	.	PUNCT
fumecheng-7594	239	1	the	the	DET
fumecheng-7594	239	2	influence	influence	NOUN
fumecheng-7594	239	3	of	of	ADP
fumecheng-7594	239	4	𝛿	𝛿	PROPN
fumecheng-7594	239	5	is	be	AUX
fumecheng-7594	239	6	quite	quite	ADV
fumecheng-7594	239	7	small	small	ADJ
fumecheng-7594	239	8	and	and	CCONJ
fumecheng-7594	239	9	thus	thus	ADV
fumecheng-7594	239	10	can	can	AUX
fumecheng-7594	239	11	be	be	AUX
fumecheng-7594	239	12	neglected	neglect	VERB
fumecheng-7594	239	13	.	.	PUNCT
fumecheng-7594	240	1	discrepancies	discrepancy	NOUN
fumecheng-7594	240	2	of	of	ADP
fumecheng-7594	240	3	the	the	DET
fumecheng-7594	240	4	step	step	NOUN
fumecheng-7594	240	5	length	length	NOUN
fumecheng-7594	240	6	depending	depend	VERB
fumecheng-7594	240	7	on	on	ADP
fumecheng-7594	240	8	the	the	DET
fumecheng-7594	240	9	preload	preload	NOUN
fumecheng-7594	240	10	when	when	SCONJ
fumecheng-7594	240	11	comparing	compare	VERB
fumecheng-7594	240	12	the	the	DET
fumecheng-7594	240	13	simulation	simulation	NOUN
fumecheng-7594	240	14	results	result	NOUN
fumecheng-7594	240	15	of	of	ADP
fumecheng-7594	240	16	the	the	DET
fumecheng-7594	240	17	standard	standard	ADJ
fumecheng-7594	240	18	case	case	NOUN
fumecheng-7594	240	19	with	with	ADP
fumecheng-7594	240	20	the	the	DET
fumecheng-7594	240	21	case	case	NOUN
fumecheng-7594	240	22	of	of	ADP
fumecheng-7594	240	23	reduced	reduce	VERB
fumecheng-7594	240	24	actuators	actuator	NOUN
fumecheng-7594	240	25	stiffness	stiffness	VERB
fumecheng-7594	240	26	and	and	CCONJ
fumecheng-7594	240	27	damping	damp	VERB
fumecheng-7594	240	28	ratio	ratio	NOUN
fumecheng-7594	240	29	are	be	AUX
fumecheng-7594	240	30	shown	show	VERB
fumecheng-7594	240	31	in	in	ADP
fumecheng-7594	240	32	fig	fig	NOUN
fumecheng-7594	240	33	.	.	PUNCT
fumecheng-7594	241	1	10	10	NUM
fumecheng-7594	241	2	where	where	SCONJ
fumecheng-7594	241	3	fig	fig	NOUN
fumecheng-7594	241	4	.	.	PUNCT
fumecheng-7594	241	5	10a	10a	PROPN
fumecheng-7594	241	6	is	be	AUX
fumecheng-7594	241	7	for	for	ADP
fumecheng-7594	241	8	the	the	DET
fumecheng-7594	241	9	case	case	NOUN
fumecheng-7594	241	10	radius	radius	NOUN
fumecheng-7594	241	11	of	of	ADP
fumecheng-7594	241	12	the	the	DET
fumecheng-7594	241	13	ruby	ruby	PROPN
fumecheng-7594	241	14	hemispheres	hemisphere	NOUN
fumecheng-7594	241	15	𝑅	𝑅	PROPN
fumecheng-7594	241	16	=	=	PROPN
fumecheng-7594	241	17	1𝑚𝑚	1𝑚𝑚	NOUN
fumecheng-7594	241	18	and	and	CCONJ
fumecheng-7594	241	19	fig	fig	NOUN
fumecheng-7594	241	20	.	.	PUNCT
fumecheng-7594	242	1	10b	10b	NOUN
fumecheng-7594	242	2	for	for	ADP
fumecheng-7594	242	3	𝑅	𝑅	PROPN
fumecheng-7594	242	4	=	=	PROPN
fumecheng-7594	242	5	0.25𝑚𝑚.	0.25𝑚𝑚.	PROPN
fumecheng-7594	242	6	a	a	DET
fumecheng-7594	242	7	similar	similar	ADJ
fumecheng-7594	242	8	trend	trend	NOUN
fumecheng-7594	242	9	as	as	ADP
fumecheng-7594	242	10	in	in	ADP
fumecheng-7594	242	11	fig	fig	NOUN
fumecheng-7594	242	12	.	.	PUNCT
fumecheng-7594	243	1	9	9	NUM
fumecheng-7594	243	2	is	be	AUX
fumecheng-7594	243	3	obtained	obtain	VERB
fumecheng-7594	243	4	.	.	PUNCT
fumecheng-7594	244	1	however	however	ADV
fumecheng-7594	244	2	,	,	PUNCT
fumecheng-7594	244	3	the	the	DET
fumecheng-7594	244	4	discrepancy	discrepancy	NOUN
fumecheng-7594	244	5	is	be	AUX
fumecheng-7594	244	6	smaller	small	ADJ
fumecheng-7594	244	7	.	.	PUNCT
fumecheng-7594	245	1	comparing	compare	VERB
fumecheng-7594	245	2	the	the	DET
fumecheng-7594	245	3	simulation	simulation	NOUN
fumecheng-7594	245	4	results	result	NOUN
fumecheng-7594	245	5	from	from	ADP
fumecheng-7594	245	6	figs	fig	NOUN
fumecheng-7594	245	7	.	.	PUNCT
fumecheng-7594	246	1	9a	9a	NOUN
fumecheng-7594	246	2	and	and	CCONJ
fumecheng-7594	246	3	10a	10a	NOUN
fumecheng-7594	246	4	with	with	ADP
fumecheng-7594	246	5	the	the	DET
fumecheng-7594	246	6	experimental	experimental	ADJ
fumecheng-7594	246	7	data	datum	NOUN
fumecheng-7594	246	8	in	in	ADP
fumecheng-7594	246	9	fig	fig	NOUN
fumecheng-7594	246	10	.	.	PUNCT
fumecheng-7594	247	1	3a	3a	NUM
fumecheng-7594	247	2	,	,	PUNCT
fumecheng-7594	247	3	it	it	PRON
fumecheng-7594	247	4	is	be	AUX
fumecheng-7594	247	5	inferred	infer	VERB
fumecheng-7594	247	6	that	that	SCONJ
fumecheng-7594	247	7	the	the	DET
fumecheng-7594	247	8	simulation	simulation	NOUN
fumecheng-7594	247	9	can	can	AUX
fumecheng-7594	247	10	cover	cover	VERB
fumecheng-7594	247	11	the	the	DET
fumecheng-7594	247	12	overall	overall	ADJ
fumecheng-7594	247	13	trend	trend	NOUN
fumecheng-7594	247	14	of	of	ADP
fumecheng-7594	247	15	the	the	DET
fumecheng-7594	247	16	experiment	experiment	NOUN
fumecheng-7594	247	17	where	where	SCONJ
fumecheng-7594	247	18	the	the	DET
fumecheng-7594	247	19	discrepancy	discrepancy	NOUN
fumecheng-7594	247	20	slightly	slightly	ADV
fumecheng-7594	247	21	increases	increase	VERB
fumecheng-7594	247	22	with	with	ADP
fumecheng-7594	247	23	rising	rise	VERB
fumecheng-7594	247	24	preloads	preload	NOUN
fumecheng-7594	247	25	.	.	PUNCT
fumecheng-7594	248	1	however	however	ADV
fumecheng-7594	248	2	,	,	PUNCT
fumecheng-7594	248	3	the	the	DET
fumecheng-7594	248	4	level	level	NOUN
fumecheng-7594	248	5	of	of	ADP
fumecheng-7594	248	6	changing	change	VERB
fumecheng-7594	248	7	in	in	ADP
fumecheng-7594	248	8	investigation	investigation	NOUN
fumecheng-7594	248	9	of	of	ADP
fumecheng-7594	248	10	influences	influence	NOUN
fumecheng-7594	248	11	of	of	ADP
fumecheng-7594	248	12	fabrication	fabrication	NOUN
fumecheng-7594	248	13	tolerances	tolerance	NOUN
fumecheng-7594	248	14	on	on	ADP
fumecheng-7594	248	15	operational	operational	ADJ
fumecheng-7594	248	16	characteristics	characteristic	NOUN
fumecheng-7594	248	17	of	of	ADP
fumecheng-7594	248	18	piezo	piezo	NOUN
fumecheng-7594	248	19	-	-	ADJ
fumecheng-7594	248	20	actuated	actuated	ADJ
fumecheng-7594	248	21	...	...	PUNCT
fumecheng-7594	248	22	121	121	NUM
fumecheng-7594	248	23	simulations	simulation	NOUN
fumecheng-7594	248	24	is	be	AUX
fumecheng-7594	248	25	still	still	ADV
fumecheng-7594	248	26	smaller	small	ADJ
fumecheng-7594	248	27	than	than	ADP
fumecheng-7594	248	28	that	that	PRON
fumecheng-7594	248	29	of	of	ADP
fumecheng-7594	248	30	the	the	DET
fumecheng-7594	248	31	experiment	experiment	NOUN
fumecheng-7594	248	32	.	.	PUNCT
fumecheng-7594	249	1	a	a	DET
fumecheng-7594	249	2	similar	similar	ADJ
fumecheng-7594	249	3	trend	trend	NOUN
fumecheng-7594	249	4	for	for	ADP
fumecheng-7594	249	5	the	the	DET
fumecheng-7594	249	6	case	case	NOUN
fumecheng-7594	249	7	𝑅	𝑅	PROPN
fumecheng-7594	249	8	=	=	NOUN
fumecheng-7594	249	9	0.25𝑚𝑚	0.25𝑚𝑚	NOUN
fumecheng-7594	249	10	is	be	AUX
fumecheng-7594	249	11	observed	observe	VERB
fumecheng-7594	249	12	.	.	PUNCT
fumecheng-7594	250	1	fig	fig	NOUN
fumecheng-7594	250	2	.	.	PUNCT
fumecheng-7594	251	1	9	9	NUM
fumecheng-7594	251	2	discrepancies	discrepancy	NOUN
fumecheng-7594	251	3	of	of	ADP
fumecheng-7594	251	4	the	the	DET
fumecheng-7594	251	5	step	step	NOUN
fumecheng-7594	251	6	length	length	NOUN
fumecheng-7594	251	7	depending	depend	VERB
fumecheng-7594	251	8	on	on	ADP
fumecheng-7594	251	9	the	the	DET
fumecheng-7594	251	10	preload	preload	NOUN
fumecheng-7594	251	11	when	when	SCONJ
fumecheng-7594	251	12	comparing	compare	VERB
fumecheng-7594	251	13	the	the	DET
fumecheng-7594	251	14	simulations	simulation	NOUN
fumecheng-7594	251	15	with	with	ADP
fumecheng-7594	251	16	the	the	DET
fumecheng-7594	251	17	standard	standard	ADJ
fumecheng-7594	251	18	case	case	NOUN
fumecheng-7594	251	19	and	and	CCONJ
fumecheng-7594	251	20	the	the	DET
fumecheng-7594	251	21	varied	varied	ADJ
fumecheng-7594	251	22	cases	case	NOUN
fumecheng-7594	251	23	(	(	PUNCT
fumecheng-7594	251	24	changing	change	VERB
fumecheng-7594	251	25	of	of	ADP
fumecheng-7594	251	26	𝛾	𝛾	NOUN
fumecheng-7594	251	27	and	and	CCONJ
fumecheng-7594	251	28	𝛿	𝛿	X
fumecheng-7594	251	29	):	):	PUNCT
fumecheng-7594	251	30	a	a	PRON
fumecheng-7594	251	31	)	)	PUNCT
fumecheng-7594	251	32	𝑅	𝑅	NOUN
fumecheng-7594	251	33	=	=	PUNCT
fumecheng-7594	251	34	1𝑚𝑚	1𝑚𝑚	NOUN
fumecheng-7594	251	35	;	;	PUNCT
fumecheng-7594	251	36	b	b	X
fumecheng-7594	251	37	)	)	PUNCT
fumecheng-7594	251	38	𝑅	𝑅	PROPN
fumecheng-7594	251	39	=	=	PUNCT
fumecheng-7594	251	40	0.25𝑚𝑚	0.25𝑚𝑚	NOUN
fumecheng-7594	251	41	fig	fig	NOUN
fumecheng-7594	251	42	.	.	PUNCT
fumecheng-7594	252	1	10	10	NUM
fumecheng-7594	252	2	discrepancies	discrepancy	NOUN
fumecheng-7594	252	3	of	of	ADP
fumecheng-7594	252	4	the	the	DET
fumecheng-7594	252	5	step	step	NOUN
fumecheng-7594	252	6	length	length	NOUN
fumecheng-7594	252	7	depending	depend	VERB
fumecheng-7594	252	8	on	on	ADP
fumecheng-7594	252	9	the	the	DET
fumecheng-7594	252	10	preload	preload	NOUN
fumecheng-7594	252	11	when	when	SCONJ
fumecheng-7594	252	12	comparing	compare	VERB
fumecheng-7594	252	13	the	the	DET
fumecheng-7594	252	14	simulations	simulation	NOUN
fumecheng-7594	252	15	with	with	ADP
fumecheng-7594	252	16	the	the	DET
fumecheng-7594	252	17	standard	standard	ADJ
fumecheng-7594	252	18	case	case	NOUN
fumecheng-7594	252	19	and	and	CCONJ
fumecheng-7594	252	20	the	the	DET
fumecheng-7594	252	21	case	case	NOUN
fumecheng-7594	252	22	with	with	ADP
fumecheng-7594	252	23	reduced	reduce	VERB
fumecheng-7594	252	24	actuators	actuator	NOUN
fumecheng-7594	252	25	stiffness	stiffness	VERB
fumecheng-7594	252	26	and	and	CCONJ
fumecheng-7594	252	27	damping	damp	VERB
fumecheng-7594	252	28	ratio	ratio	NOUN
fumecheng-7594	252	29	:	:	PUNCT
fumecheng-7594	252	30	a	a	X
fumecheng-7594	252	31	)	)	PUNCT
fumecheng-7594	252	32	𝑅	𝑅	NOUN
fumecheng-7594	252	33	=	=	PUNCT
fumecheng-7594	252	34	1𝑚𝑚	1𝑚𝑚	NOUN
fumecheng-7594	252	35	;	;	PUNCT
fumecheng-7594	252	36	b	b	X
fumecheng-7594	252	37	)	)	PUNCT
fumecheng-7594	252	38	𝑅	𝑅	NOUN
fumecheng-7594	252	39	=	=	PUNCT
fumecheng-7594	252	40	0.25𝑚𝑚	0.25𝑚𝑚	NOUN
fumecheng-7594	252	41	it	it	PRON
fumecheng-7594	252	42	can	can	AUX
fumecheng-7594	252	43	be	be	AUX
fumecheng-7594	252	44	concluded	conclude	VERB
fumecheng-7594	252	45	that	that	SCONJ
fumecheng-7594	252	46	when	when	SCONJ
fumecheng-7594	252	47	the	the	DET
fumecheng-7594	252	48	size	size	NOUN
fumecheng-7594	252	49	of	of	ADP
fumecheng-7594	252	50	the	the	DET
fumecheng-7594	252	51	system	system	NOUN
fumecheng-7594	252	52	is	be	AUX
fumecheng-7594	252	53	reduced	reduce	VERB
fumecheng-7594	252	54	,	,	PUNCT
fumecheng-7594	252	55	the	the	DET
fumecheng-7594	252	56	repeatability	repeatability	NOUN
fumecheng-7594	252	57	of	of	ADP
fumecheng-7594	252	58	the	the	DET
fumecheng-7594	252	59	step	step	NOUN
fumecheng-7594	252	60	length	length	NOUN
fumecheng-7594	252	61	is	be	AUX
fumecheng-7594	252	62	decreased	decrease	VERB
fumecheng-7594	252	63	and	and	CCONJ
fumecheng-7594	252	64	the	the	DET
fumecheng-7594	252	65	influence	influence	NOUN
fumecheng-7594	252	66	of	of	ADP
fumecheng-7594	252	67	the	the	DET
fumecheng-7594	252	68	fabrication	fabrication	NOUN
fumecheng-7594	252	69	and	and	CCONJ
fumecheng-7594	252	70	assembly	assembly	NOUN
fumecheng-7594	252	71	tolerance	tolerance	NOUN
fumecheng-7594	252	72	becomes	become	VERB
fumecheng-7594	252	73	more	more	ADV
fumecheng-7594	252	74	apparent	apparent	ADJ
fumecheng-7594	252	75	with	with	ADP
fumecheng-7594	252	76	the	the	DET
fumecheng-7594	252	77	increasing	increase	VERB
fumecheng-7594	252	78	discrepancy	discrepancy	NOUN
fumecheng-7594	252	79	.	.	PUNCT
fumecheng-7594	253	1	the	the	DET
fumecheng-7594	253	2	fabrication	fabrication	NOUN
fumecheng-7594	253	3	tolerance	tolerance	NOUN
fumecheng-7594	253	4	of	of	ADP
fumecheng-7594	253	5	the	the	DET
fumecheng-7594	253	6	runner	runner	NOUN
fumecheng-7594	253	7	has	have	VERB
fumecheng-7594	253	8	the	the	DET
fumecheng-7594	253	9	strongest	strong	ADJ
fumecheng-7594	253	10	influence	influence	NOUN
fumecheng-7594	253	11	on	on	ADP
fumecheng-7594	253	12	the	the	DET
fumecheng-7594	253	13	step	step	NOUN
fumecheng-7594	253	14	length	length	NOUN
fumecheng-7594	253	15	because	because	SCONJ
fumecheng-7594	253	16	it	it	PRON
fumecheng-7594	253	17	changes	change	VERB
fumecheng-7594	253	18	both	both	CCONJ
fumecheng-7594	253	19	the	the	DET
fumecheng-7594	253	20	actuation	actuation	NOUN
fumecheng-7594	253	21	amplitude	amplitude	NOUN
fumecheng-7594	253	22	and	and	CCONJ
fumecheng-7594	253	23	the	the	DET
fumecheng-7594	253	24	normal	normal	ADJ
fumecheng-7594	253	25	contact	contact	NOUN
fumecheng-7594	253	26	forces	force	NOUN
fumecheng-7594	253	27	.	.	PUNCT
fumecheng-7594	254	1	(	(	PUNCT
fumecheng-7594	254	2	a	a	X
fumecheng-7594	254	3	)	)	PUNCT
fumecheng-7594	254	4	(	(	PUNCT
fumecheng-7594	254	5	b	b	X
fumecheng-7594	254	6	)	)	PUNCT
fumecheng-7594	254	7	(	(	PUNCT
fumecheng-7594	254	8	a	a	X
fumecheng-7594	254	9	)	)	PUNCT
fumecheng-7594	254	10	(	(	PUNCT
fumecheng-7594	254	11	b	b	X
fumecheng-7594	254	12	)	)	PUNCT
fumecheng-7594	254	13	122	122	NUM
fumecheng-7594	254	14	h.	h.	PROPN
fumecheng-7594	254	15	x.	x.	PROPN
fumecheng-7594	254	16	nguyen	nguyen	PROPN
fumecheng-7594	254	17	,	,	PUNCT
fumecheng-7594	254	18	a.	a.	PROPN
fumecheng-7594	254	19	h.	h.	PROPN
fumecheng-7594	254	20	nguyen	nguyen	PROPN
fumecheng-7594	255	1	4.2	4.2	NUM
fumecheng-7594	255	2	.	.	PUNCT
fumecheng-7594	256	1	the	the	DET
fumecheng-7594	256	2	critical	critical	ADJ
fumecheng-7594	256	3	amplitude	amplitude	NOUN
fumecheng-7594	256	4	the	the	DET
fumecheng-7594	256	5	so	so	ADV
fumecheng-7594	256	6	-	-	PUNCT
fumecheng-7594	256	7	called	call	VERB
fumecheng-7594	256	8	“	"	PUNCT
fumecheng-7594	256	9	zero	zero	NUM
fumecheng-7594	256	10	/	/	SYM
fumecheng-7594	256	11	critical	critical	ADJ
fumecheng-7594	256	12	-	-	PUNCT
fumecheng-7594	256	13	amplitude	amplitude	NOUN
fumecheng-7594	256	14	”	"	PUNCT
fumecheng-7594	256	15	phenomenon	phenomenon	NOUN
fumecheng-7594	256	16	of	of	ADP
fumecheng-7594	256	17	passmds	passmds	NOUN
fumecheng-7594	256	18	was	be	AUX
fumecheng-7594	256	19	experimentally	experimentally	ADV
fumecheng-7594	256	20	detected	detect	VERB
fumecheng-7594	256	21	and	and	CCONJ
fumecheng-7594	256	22	modeled	model	VERB
fumecheng-7594	256	23	in	in	ADP
fumecheng-7594	256	24	previously	previously	ADV
fumecheng-7594	256	25	published	publish	VERB
fumecheng-7594	256	26	works	work	NOUN
fumecheng-7594	256	27	[	[	X
fumecheng-7594	256	28	10	10	NUM
fumecheng-7594	256	29	,	,	PUNCT
fumecheng-7594	256	30	14	14	NUM
fumecheng-7594	256	31	,	,	PUNCT
fumecheng-7594	256	32	16	16	NUM
fumecheng-7594	256	33	,	,	PUNCT
fumecheng-7594	256	34	18	18	NUM
fumecheng-7594	256	35	,	,	PUNCT
fumecheng-7594	256	36	20	20	NUM
fumecheng-7594	256	37	]	]	PUNCT
fumecheng-7594	256	38	.	.	PUNCT
fumecheng-7594	257	1	if	if	SCONJ
fumecheng-7594	257	2	the	the	DET
fumecheng-7594	257	3	actuation	actuation	NOUN
fumecheng-7594	257	4	amplitude	amplitude	NOUN
fumecheng-7594	257	5	of	of	ADP
fumecheng-7594	257	6	the	the	DET
fumecheng-7594	257	7	piezo	piezo	PROPN
fumecheng-7594	257	8	elements	element	NOUN
fumecheng-7594	257	9	is	be	AUX
fumecheng-7594	257	10	smaller	small	ADJ
fumecheng-7594	257	11	than	than	ADP
fumecheng-7594	257	12	a	a	DET
fumecheng-7594	257	13	critical	critical	ADJ
fumecheng-7594	257	14	value	value	NOUN
fumecheng-7594	257	15	,	,	PUNCT
fumecheng-7594	257	16	no	no	DET
fumecheng-7594	257	17	measurable	measurable	ADJ
fumecheng-7594	257	18	step	step	NOUN
fumecheng-7594	257	19	of	of	ADP
fumecheng-7594	257	20	the	the	DET
fumecheng-7594	257	21	runner	runner	NOUN
fumecheng-7594	257	22	is	be	AUX
fumecheng-7594	257	23	achieved	achieve	VERB
fumecheng-7594	257	24	.	.	PUNCT
fumecheng-7594	258	1	the	the	DET
fumecheng-7594	258	2	runner	runner	NOUN
fumecheng-7594	258	3	is	be	AUX
fumecheng-7594	258	4	only	only	ADV
fumecheng-7594	258	5	oscillated	oscillate	VERB
fumecheng-7594	258	6	around	around	ADP
fumecheng-7594	258	7	its	its	PRON
fumecheng-7594	258	8	initial	initial	ADJ
fumecheng-7594	258	9	position	position	NOUN
fumecheng-7594	258	10	without	without	ADP
fumecheng-7594	258	11	any	any	DET
fumecheng-7594	258	12	generation	generation	NOUN
fumecheng-7594	258	13	of	of	ADP
fumecheng-7594	258	14	a	a	DET
fumecheng-7594	258	15	net	net	ADJ
fumecheng-7594	258	16	step	step	NOUN
fumecheng-7594	258	17	.	.	PUNCT
fumecheng-7594	259	1	this	this	DET
fumecheng-7594	259	2	phenomenon	phenomenon	NOUN
fumecheng-7594	259	3	relates	relate	VERB
fumecheng-7594	259	4	directly	directly	ADV
fumecheng-7594	259	5	to	to	ADP
fumecheng-7594	259	6	the	the	DET
fumecheng-7594	259	7	maximal	maximal	ADJ
fumecheng-7594	259	8	tangential	tangential	ADJ
fumecheng-7594	259	9	deformation	deformation	NOUN
fumecheng-7594	259	10	of	of	ADP
fumecheng-7594	259	11	the	the	DET
fumecheng-7594	259	12	guiding	guide	VERB
fumecheng-7594	259	13	contact	contact	NOUN
fumecheng-7594	259	14	between	between	ADP
fumecheng-7594	259	15	the	the	DET
fumecheng-7594	259	16	runner	runner	NOUN
fumecheng-7594	259	17	and	and	CCONJ
fumecheng-7594	259	18	the	the	DET
fumecheng-7594	259	19	actuators	actuator	NOUN
fumecheng-7594	259	20	and	and	CCONJ
fumecheng-7594	259	21	the	the	DET
fumecheng-7594	259	22	tangential	tangential	ADJ
fumecheng-7594	259	23	dynamic	dynamic	ADJ
fumecheng-7594	259	24	behavior	behavior	NOUN
fumecheng-7594	259	25	of	of	ADP
fumecheng-7594	259	26	the	the	DET
fumecheng-7594	259	27	piezo	piezo	X
fumecheng-7594	259	28	actuators	actuator	NOUN
fumecheng-7594	259	29	.	.	PUNCT
fumecheng-7594	260	1	the	the	DET
fumecheng-7594	260	2	state	state	NOUN
fumecheng-7594	260	3	-	-	PUNCT
fumecheng-7594	260	4	of	of	ADP
fumecheng-7594	260	5	-	-	PUNCT
fumecheng-7594	260	6	the	the	DET
fumecheng-7594	260	7	-	-	PUNCT
fumecheng-7594	260	8	art	art	NOUN
fumecheng-7594	260	9	explanation	explanation	NOUN
fumecheng-7594	260	10	for	for	ADP
fumecheng-7594	260	11	this	this	DET
fumecheng-7594	260	12	phenomenon	phenomenon	NOUN
fumecheng-7594	260	13	is	be	AUX
fumecheng-7594	260	14	presented	present	VERB
fumecheng-7594	260	15	in	in	ADP
fumecheng-7594	260	16	[	[	X
fumecheng-7594	260	17	20	20	NUM
fumecheng-7594	260	18	]	]	PUNCT
fumecheng-7594	260	19	.	.	PUNCT
fumecheng-7594	261	1	in	in	ADP
fumecheng-7594	261	2	this	this	DET
fumecheng-7594	261	3	work	work	NOUN
fumecheng-7594	261	4	,	,	PUNCT
fumecheng-7594	261	5	the	the	DET
fumecheng-7594	261	6	influences	influence	NOUN
fumecheng-7594	261	7	of	of	ADP
fumecheng-7594	261	8	the	the	DET
fumecheng-7594	261	9	fabrication	fabrication	NOUN
fumecheng-7594	261	10	and	and	CCONJ
fumecheng-7594	261	11	assembly	assembly	NOUN
fumecheng-7594	261	12	tolerances	tolerance	NOUN
fumecheng-7594	261	13	of	of	ADP
fumecheng-7594	261	14	the	the	DET
fumecheng-7594	261	15	system	system	NOUN
fumecheng-7594	261	16	on	on	ADP
fumecheng-7594	261	17	this	this	DET
fumecheng-7594	261	18	characteristic	characteristic	NOUN
fumecheng-7594	261	19	are	be	AUX
fumecheng-7594	261	20	analyzed	analyze	VERB
fumecheng-7594	261	21	.	.	PUNCT
fumecheng-7594	262	1	based	base	VERB
fumecheng-7594	262	2	on	on	ADP
fumecheng-7594	262	3	the	the	DET
fumecheng-7594	262	4	variation	variation	NOUN
fumecheng-7594	262	5	of	of	ADP
fumecheng-7594	262	6	the	the	DET
fumecheng-7594	262	7	parameters	parameter	NOUN
fumecheng-7594	262	8	in	in	ADP
fumecheng-7594	262	9	table	table	NOUN
fumecheng-7594	262	10	3	3	NUM
fumecheng-7594	262	11	,	,	PUNCT
fumecheng-7594	262	12	simulations	simulation	NOUN
fumecheng-7594	262	13	of	of	ADP
fumecheng-7594	262	14	the	the	DET
fumecheng-7594	262	15	dependency	dependency	NOUN
fumecheng-7594	262	16	of	of	ADP
fumecheng-7594	262	17	the	the	DET
fumecheng-7594	262	18	critical	critical	ADJ
fumecheng-7594	262	19	amplitude	amplitude	NOUN
fumecheng-7594	262	20	on	on	ADP
fumecheng-7594	262	21	the	the	DET
fumecheng-7594	262	22	preload	preload	NOUN
fumecheng-7594	262	23	were	be	AUX
fumecheng-7594	262	24	performed	perform	VERB
fumecheng-7594	262	25	.	.	PUNCT
fumecheng-7594	263	1	in	in	ADP
fumecheng-7594	263	2	fig	fig	NOUN
fumecheng-7594	263	3	.	.	PUNCT
fumecheng-7594	264	1	11a	11a	NOUN
fumecheng-7594	264	2	,	,	PUNCT
fumecheng-7594	264	3	discrepancies	discrepancy	NOUN
fumecheng-7594	264	4	between	between	ADP
fumecheng-7594	264	5	simulation	simulation	NOUN
fumecheng-7594	264	6	results	result	NOUN
fumecheng-7594	264	7	of	of	ADP
fumecheng-7594	264	8	the	the	DET
fumecheng-7594	264	9	standard	standard	ADJ
fumecheng-7594	264	10	case	case	NOUN
fumecheng-7594	264	11	and	and	CCONJ
fumecheng-7594	264	12	the	the	DET
fumecheng-7594	264	13	varied	varied	ADJ
fumecheng-7594	264	14	case	case	NOUN
fumecheng-7594	264	15	(	(	PUNCT
fumecheng-7594	264	16	𝛾	𝛾	NOUN
fumecheng-7594	264	17	=	=	SYM
fumecheng-7594	264	18	85	85	NUM
fumecheng-7594	264	19	°	°	NUM
fumecheng-7594	264	20	)	)	PUNCT
fumecheng-7594	264	21	of	of	ADP
fumecheng-7594	264	22	the	the	DET
fumecheng-7594	264	23	critical	critical	ADJ
fumecheng-7594	264	24	amplitude	amplitude	NOUN
fumecheng-7594	264	25	depended	depend	VERB
fumecheng-7594	264	26	on	on	ADP
fumecheng-7594	264	27	the	the	DET
fumecheng-7594	264	28	preload	preload	NOUN
fumecheng-7594	264	29	are	be	AUX
fumecheng-7594	264	30	shown	show	VERB
fumecheng-7594	264	31	.	.	PUNCT
fumecheng-7594	265	1	two	two	NUM
fumecheng-7594	265	2	cases	case	NOUN
fumecheng-7594	265	3	of	of	ADP
fumecheng-7594	265	4	the	the	DET
fumecheng-7594	265	5	radius	radius	NOUN
fumecheng-7594	265	6	of	of	ADP
fumecheng-7594	265	7	the	the	DET
fumecheng-7594	265	8	ruby	ruby	PROPN
fumecheng-7594	265	9	hemispheres	hemisphere	NOUN
fumecheng-7594	265	10	are	be	AUX
fumecheng-7594	265	11	considered	consider	VERB
fumecheng-7594	265	12	.	.	PUNCT
fumecheng-7594	266	1	it	it	PRON
fumecheng-7594	266	2	is	be	AUX
fumecheng-7594	266	3	seen	see	VERB
fumecheng-7594	266	4	that	that	SCONJ
fumecheng-7594	266	5	,	,	PUNCT
fumecheng-7594	266	6	for	for	ADP
fumecheng-7594	266	7	both	both	DET
fumecheng-7594	266	8	cases	case	NOUN
fumecheng-7594	266	9	of	of	ADP
fumecheng-7594	266	10	the	the	DET
fumecheng-7594	266	11	radius	radius	NOUN
fumecheng-7594	266	12	,	,	PUNCT
fumecheng-7594	266	13	the	the	DET
fumecheng-7594	266	14	discrepancy	discrepancy	NOUN
fumecheng-7594	266	15	varies	vary	VERB
fumecheng-7594	266	16	from	from	ADP
fumecheng-7594	266	17	2	2	NUM
fumecheng-7594	266	18	to	to	PART
fumecheng-7594	266	19	7	7	NUM
fumecheng-7594	266	20	%	%	NOUN
fumecheng-7594	266	21	for	for	ADP
fumecheng-7594	266	22	the	the	DET
fumecheng-7594	266	23	overall	overall	ADJ
fumecheng-7594	266	24	preload	preload	NOUN
fumecheng-7594	266	25	range	range	NOUN
fumecheng-7594	266	26	.	.	PUNCT
fumecheng-7594	267	1	this	this	DET
fumecheng-7594	267	2	discrepancy	discrepancy	NOUN
fumecheng-7594	267	3	qualitatively	qualitatively	ADV
fumecheng-7594	267	4	matched	match	VERB
fumecheng-7594	267	5	with	with	ADP
fumecheng-7594	267	6	the	the	DET
fumecheng-7594	267	7	experimental	experimental	ADJ
fumecheng-7594	267	8	data	datum	NOUN
fumecheng-7594	267	9	where	where	SCONJ
fumecheng-7594	267	10	the	the	DET
fumecheng-7594	267	11	maximal	maximal	ADJ
fumecheng-7594	267	12	values	value	NOUN
fumecheng-7594	267	13	vary	vary	VERB
fumecheng-7594	267	14	from	from	ADP
fumecheng-7594	267	15	6.8	6.8	NUM
fumecheng-7594	267	16	to	to	PART
fumecheng-7594	267	17	8.2	8.2	NUM
fumecheng-7594	267	18	%	%	NOUN
fumecheng-7594	267	19	(	(	PUNCT
fumecheng-7594	267	20	see	see	VERB
fumecheng-7594	267	21	fig	fig	NOUN
fumecheng-7594	267	22	.	.	PUNCT
fumecheng-7594	268	1	4	4	NUM
fumecheng-7594	268	2	and	and	CCONJ
fumecheng-7594	268	3	the	the	DET
fumecheng-7594	268	4	corresponding	correspond	VERB
fumecheng-7594	268	5	text	text	NOUN
fumecheng-7594	268	6	)	)	PUNCT
fumecheng-7594	268	7	.	.	PUNCT
fumecheng-7594	269	1	simulations	simulation	NOUN
fumecheng-7594	269	2	for	for	ADP
fumecheng-7594	269	3	other	other	ADJ
fumecheng-7594	269	4	varied	varied	ADJ
fumecheng-7594	269	5	cases	case	NOUN
fumecheng-7594	269	6	(	(	PUNCT
fumecheng-7594	269	7	changes	change	NOUN
fumecheng-7594	269	8	of	of	ADP
fumecheng-7594	269	9	𝛿	𝛿	ADJ
fumecheng-7594	269	10	,	,	PUNCT
fumecheng-7594	269	11	stiffness	stiffness	NOUN
fumecheng-7594	269	12	and	and	CCONJ
fumecheng-7594	269	13	damping	damp	VERB
fumecheng-7594	269	14	ratio	ratio	NOUN
fumecheng-7594	269	15	)	)	PUNCT
fumecheng-7594	269	16	show	show	VERB
fumecheng-7594	269	17	that	that	SCONJ
fumecheng-7594	269	18	the	the	DET
fumecheng-7594	269	19	discrepancy	discrepancy	NOUN
fumecheng-7594	269	20	is	be	AUX
fumecheng-7594	269	21	smaller	small	ADJ
fumecheng-7594	269	22	and	and	CCONJ
fumecheng-7594	269	23	has	have	VERB
fumecheng-7594	269	24	a	a	DET
fumecheng-7594	269	25	similar	similar	ADJ
fumecheng-7594	269	26	trend	trend	NOUN
fumecheng-7594	269	27	.	.	PUNCT
fumecheng-7594	270	1	for	for	ADP
fumecheng-7594	270	2	the	the	DET
fumecheng-7594	270	3	sake	sake	NOUN
fumecheng-7594	270	4	of	of	ADP
fumecheng-7594	270	5	brevity	brevity	NOUN
fumecheng-7594	270	6	,	,	PUNCT
fumecheng-7594	270	7	the	the	DET
fumecheng-7594	270	8	results	result	NOUN
fumecheng-7594	270	9	are	be	AUX
fumecheng-7594	270	10	not	not	PART
fumecheng-7594	270	11	shown	show	VERB
fumecheng-7594	270	12	here	here	ADV
fumecheng-7594	270	13	.	.	PUNCT
fumecheng-7594	271	1	the	the	DET
fumecheng-7594	271	2	obtained	obtain	VERB
fumecheng-7594	271	3	results	result	NOUN
fumecheng-7594	271	4	can	can	AUX
fumecheng-7594	271	5	be	be	AUX
fumecheng-7594	271	6	explained	explain	VERB
fumecheng-7594	271	7	based	base	VERB
fumecheng-7594	271	8	on	on	ADP
fumecheng-7594	271	9	the	the	DET
fumecheng-7594	271	10	causation	causation	NOUN
fumecheng-7594	271	11	of	of	ADP
fumecheng-7594	271	12	the	the	DET
fumecheng-7594	271	13	critical	critical	ADJ
fumecheng-7594	271	14	amplitude	amplitude	NOUN
fumecheng-7594	271	15	.	.	PUNCT
fumecheng-7594	272	1	if	if	SCONJ
fumecheng-7594	272	2	𝛾	𝛾	NOUN
fumecheng-7594	272	3	is	be	AUX
fumecheng-7594	272	4	changed	change	VERB
fumecheng-7594	272	5	,	,	PUNCT
fumecheng-7594	272	6	the	the	DET
fumecheng-7594	272	7	normal	normal	ADJ
fumecheng-7594	272	8	contact	contact	NOUN
fumecheng-7594	272	9	force	force	NOUN
fumecheng-7594	272	10	and	and	CCONJ
fumecheng-7594	272	11	the	the	DET
fumecheng-7594	272	12	displacement	displacement	ADJ
fumecheng-7594	272	13	amplitude	amplitude	NOUN
fumecheng-7594	272	14	of	of	ADP
fumecheng-7594	272	15	the	the	DET
fumecheng-7594	272	16	contact	contact	NOUN
fumecheng-7594	272	17	point	point	NOUN
fumecheng-7594	272	18	are	be	AUX
fumecheng-7594	272	19	changed	change	VERB
fumecheng-7594	272	20	,	,	PUNCT
fumecheng-7594	272	21	leading	lead	VERB
fumecheng-7594	272	22	to	to	ADP
fumecheng-7594	272	23	a	a	DET
fumecheng-7594	272	24	change	change	NOUN
fumecheng-7594	272	25	in	in	ADP
fumecheng-7594	272	26	critical	critical	ADJ
fumecheng-7594	272	27	amplitude	amplitude	NOUN
fumecheng-7594	272	28	.	.	PUNCT
fumecheng-7594	273	1	for	for	ADP
fumecheng-7594	273	2	the	the	DET
fumecheng-7594	273	3	case	case	NOUN
fumecheng-7594	273	4	of	of	ADP
fumecheng-7594	273	5	changing	change	VERB
fumecheng-7594	273	6	of	of	ADP
fumecheng-7594	273	7	𝛿	𝛿	ADJ
fumecheng-7594	273	8	,	,	PUNCT
fumecheng-7594	273	9	only	only	ADV
fumecheng-7594	273	10	the	the	DET
fumecheng-7594	273	11	displacement	displacement	ADJ
fumecheng-7594	273	12	amplitude	amplitude	NOUN
fumecheng-7594	273	13	of	of	ADP
fumecheng-7594	273	14	the	the	DET
fumecheng-7594	273	15	contact	contact	NOUN
fumecheng-7594	273	16	point	point	NOUN
fumecheng-7594	273	17	is	be	AUX
fumecheng-7594	273	18	changed	change	VERB
fumecheng-7594	273	19	and	and	CCONJ
fumecheng-7594	273	20	thus	thus	ADV
fumecheng-7594	273	21	,	,	PUNCT
fumecheng-7594	273	22	the	the	DET
fumecheng-7594	273	23	changing	changing	NOUN
fumecheng-7594	273	24	of	of	ADP
fumecheng-7594	273	25	the	the	DET
fumecheng-7594	273	26	critical	critical	ADJ
fumecheng-7594	273	27	amplitude	amplitude	NOUN
fumecheng-7594	273	28	is	be	AUX
fumecheng-7594	273	29	smaller	small	ADJ
fumecheng-7594	273	30	.	.	PUNCT
fumecheng-7594	274	1	similarly	similarly	ADV
fumecheng-7594	274	2	,	,	PUNCT
fumecheng-7594	274	3	for	for	ADP
fumecheng-7594	274	4	the	the	DET
fumecheng-7594	274	5	case	case	NOUN
fumecheng-7594	274	6	of	of	ADP
fumecheng-7594	274	7	reducing	reduce	VERB
fumecheng-7594	274	8	stiffness	stiffness	NOUN
fumecheng-7594	274	9	and	and	CCONJ
fumecheng-7594	274	10	damping	damp	VERB
fumecheng-7594	274	11	ratio	ratio	NOUN
fumecheng-7594	274	12	,	,	PUNCT
fumecheng-7594	274	13	a	a	DET
fumecheng-7594	274	14	reduction	reduction	NOUN
fumecheng-7594	274	15	of	of	ADP
fumecheng-7594	274	16	10	10	NUM
fumecheng-7594	274	17	%	%	NOUN
fumecheng-7594	274	18	or	or	CCONJ
fumecheng-7594	274	19	20	20	NUM
fumecheng-7594	274	20	%	%	NOUN
fumecheng-7594	274	21	does	do	AUX
fumecheng-7594	274	22	not	not	PART
fumecheng-7594	274	23	much	much	ADV
fumecheng-7594	274	24	affect	affect	VERB
fumecheng-7594	274	25	the	the	DET
fumecheng-7594	274	26	stiffness	stiffness	NOUN
fumecheng-7594	274	27	and	and	CCONJ
fumecheng-7594	274	28	damping	damp	VERB
fumecheng-7594	274	29	ratio	ratio	NOUN
fumecheng-7594	274	30	because	because	SCONJ
fumecheng-7594	274	31	their	their	PRON
fumecheng-7594	274	32	values	value	NOUN
fumecheng-7594	274	33	are	be	AUX
fumecheng-7594	274	34	still	still	ADV
fumecheng-7594	274	35	high	high	ADJ
fumecheng-7594	274	36	.	.	PUNCT
fumecheng-7594	275	1	therefore	therefore	ADV
fumecheng-7594	275	2	,	,	PUNCT
fumecheng-7594	275	3	less	less	ADV
fumecheng-7594	275	4	changing	changing	NOUN
fumecheng-7594	275	5	of	of	ADP
fumecheng-7594	275	6	the	the	DET
fumecheng-7594	275	7	critical	critical	ADJ
fumecheng-7594	275	8	amplitude	amplitude	NOUN
fumecheng-7594	275	9	is	be	AUX
fumecheng-7594	275	10	achieved	achieve	VERB
fumecheng-7594	275	11	.	.	PUNCT
fumecheng-7594	276	1	we	we	PRON
fumecheng-7594	276	2	come	come	VERB
fumecheng-7594	276	3	to	to	ADP
fumecheng-7594	276	4	the	the	DET
fumecheng-7594	276	5	conclusions	conclusion	NOUN
fumecheng-7594	276	6	that	that	PRON
fumecheng-7594	276	7	for	for	ADP
fumecheng-7594	276	8	actuators	actuator	NOUN
fumecheng-7594	276	9	with	with	ADP
fumecheng-7594	276	10	high	high	ADJ
fumecheng-7594	276	11	stiffness	stiffness	NOUN
fumecheng-7594	276	12	,	,	PUNCT
fumecheng-7594	276	13	the	the	DET
fumecheng-7594	276	14	influence	influence	NOUN
fumecheng-7594	276	15	of	of	ADP
fumecheng-7594	276	16	the	the	DET
fumecheng-7594	276	17	fabrication	fabrication	NOUN
fumecheng-7594	276	18	tolerance	tolerance	NOUN
fumecheng-7594	276	19	on	on	ADP
fumecheng-7594	276	20	the	the	DET
fumecheng-7594	276	21	critical	critical	ADJ
fumecheng-7594	276	22	amplitude	amplitude	NOUN
fumecheng-7594	276	23	is	be	AUX
fumecheng-7594	276	24	very	very	ADV
fumecheng-7594	276	25	small	small	ADJ
fumecheng-7594	276	26	and	and	CCONJ
fumecheng-7594	276	27	can	can	AUX
fumecheng-7594	276	28	be	be	AUX
fumecheng-7594	276	29	neglected	neglect	VERB
fumecheng-7594	276	30	.	.	PUNCT
fumecheng-7594	277	1	the	the	DET
fumecheng-7594	277	2	influence	influence	NOUN
fumecheng-7594	277	3	of	of	ADP
fumecheng-7594	277	4	𝛿	𝛿	PROPN
fumecheng-7594	277	5	is	be	AUX
fumecheng-7594	277	6	also	also	ADV
fumecheng-7594	277	7	small	small	ADJ
fumecheng-7594	277	8	since	since	SCONJ
fumecheng-7594	277	9	it	it	PRON
fumecheng-7594	277	10	changes	change	VERB
fumecheng-7594	277	11	only	only	ADV
fumecheng-7594	277	12	the	the	DET
fumecheng-7594	277	13	displacement	displacement	ADJ
fumecheng-7594	277	14	amplitude	amplitude	NOUN
fumecheng-7594	277	15	of	of	ADP
fumecheng-7594	277	16	the	the	DET
fumecheng-7594	277	17	contact	contact	NOUN
fumecheng-7594	277	18	point	point	NOUN
fumecheng-7594	277	19	in	in	ADP
fumecheng-7594	277	20	a	a	DET
fumecheng-7594	277	21	small	small	ADJ
fumecheng-7594	277	22	amount	amount	NOUN
fumecheng-7594	277	23	proportional	proportional	ADJ
fumecheng-7594	277	24	to	to	ADP
fumecheng-7594	277	25	the	the	DET
fumecheng-7594	277	26	ratio	ratio	NOUN
fumecheng-7594	277	27	𝐴/𝐴′.	𝐴/𝐴′.	ADP
fumecheng-7594	277	28	in	in	ADP
fumecheng-7594	277	29	[	[	X
fumecheng-7594	277	30	20	20	NUM
fumecheng-7594	277	31	]	]	PUNCT
fumecheng-7594	277	32	,	,	PUNCT
fumecheng-7594	277	33	analytical	analytical	ADJ
fumecheng-7594	277	34	formulations	formulation	NOUN
fumecheng-7594	277	35	(	(	PUNCT
fumecheng-7594	277	36	eqs	eqs	X
fumecheng-7594	277	37	.	.	PUNCT
fumecheng-7594	278	1	(	(	PUNCT
fumecheng-7594	278	2	10	10	NUM
fumecheng-7594	278	3	)	)	PUNCT
fumecheng-7594	278	4	–	–	PUNCT
fumecheng-7594	278	5	(	(	PUNCT
fumecheng-7594	278	6	14	14	NUM
fumecheng-7594	278	7	)	)	PUNCT
fumecheng-7594	278	8	of	of	ADP
fumecheng-7594	278	9	[	[	X
fumecheng-7594	278	10	20	20	NUM
fumecheng-7594	278	11	]	]	PUNCT
fumecheng-7594	278	12	)	)	PUNCT
fumecheng-7594	278	13	for	for	ADP
fumecheng-7594	278	14	explaining	explain	VERB
fumecheng-7594	278	15	the	the	DET
fumecheng-7594	278	16	critical	critical	ADJ
fumecheng-7594	278	17	amplitude	amplitude	NOUN
fumecheng-7594	278	18	were	be	AUX
fumecheng-7594	278	19	established	establish	VERB
fumecheng-7594	278	20	,	,	PUNCT
fumecheng-7594	278	21	which	which	PRON
fumecheng-7594	278	22	are	be	AUX
fumecheng-7594	278	23	an	an	DET
fumecheng-7594	278	24	extension	extension	NOUN
fumecheng-7594	278	25	of	of	ADP
fumecheng-7594	278	26	eq	eq	PROPN
fumecheng-7594	278	27	.	.	PUNCT
fumecheng-7594	279	1	(	(	PUNCT
fumecheng-7594	279	2	3.26	3.26	NUM
fumecheng-7594	279	3	)	)	PUNCT
fumecheng-7594	279	4	of	of	ADP
fumecheng-7594	279	5	[	[	X
fumecheng-7594	279	6	22	22	NUM
fumecheng-7594	279	7	]	]	PUNCT
fumecheng-7594	279	8	when	when	SCONJ
fumecheng-7594	279	9	considering	consider	VERB
fumecheng-7594	279	10	the	the	DET
fumecheng-7594	279	11	dynamic	dynamic	ADJ
fumecheng-7594	279	12	behavior	behavior	NOUN
fumecheng-7594	279	13	of	of	ADP
fumecheng-7594	279	14	the	the	DET
fumecheng-7594	279	15	actuators	actuator	NOUN
fumecheng-7594	279	16	.	.	PUNCT
fumecheng-7594	280	1	the	the	DET
fumecheng-7594	280	2	formulations	formulation	NOUN
fumecheng-7594	280	3	fit	fit	VERB
fumecheng-7594	280	4	excellently	excellently	ADV
fumecheng-7594	280	5	with	with	ADP
fumecheng-7594	280	6	experimental	experimental	ADJ
fumecheng-7594	280	7	data	datum	NOUN
fumecheng-7594	280	8	.	.	PUNCT
fumecheng-7594	281	1	however	however	ADV
fumecheng-7594	281	2	,	,	PUNCT
fumecheng-7594	281	3	the	the	DET
fumecheng-7594	281	4	formulations	formulation	NOUN
fumecheng-7594	281	5	are	be	AUX
fumecheng-7594	281	6	established	establish	VERB
fumecheng-7594	281	7	in	in	ADP
fumecheng-7594	281	8	an	an	DET
fumecheng-7594	281	9	assumption	assumption	NOUN
fumecheng-7594	281	10	that	that	SCONJ
fumecheng-7594	281	11	the	the	DET
fumecheng-7594	281	12	behavior	behavior	NOUN
fumecheng-7594	281	13	of	of	ADP
fumecheng-7594	281	14	an	an	DET
fumecheng-7594	281	15	individual	individual	ADJ
fumecheng-7594	281	16	actuator	actuator	NOUN
fumecheng-7594	281	17	in	in	ADP
fumecheng-7594	281	18	each	each	DET
fumecheng-7594	281	19	actuator	actuator	NOUN
fumecheng-7594	281	20	group	group	NOUN
fumecheng-7594	281	21	is	be	AUX
fumecheng-7594	281	22	identical	identical	ADJ
fumecheng-7594	281	23	.	.	PUNCT
fumecheng-7594	282	1	no	no	DET
fumecheng-7594	282	2	fabrication	fabrication	NOUN
fumecheng-7594	282	3	and	and	CCONJ
fumecheng-7594	282	4	assembly	assembly	NOUN
fumecheng-7594	282	5	tolerance	tolerance	NOUN
fumecheng-7594	282	6	are	be	AUX
fumecheng-7594	282	7	considered	consider	VERB
fumecheng-7594	282	8	.	.	PUNCT
fumecheng-7594	283	1	thus	thus	ADV
fumecheng-7594	283	2	,	,	PUNCT
fumecheng-7594	283	3	in	in	ADP
fumecheng-7594	283	4	this	this	DET
fumecheng-7594	283	5	paper	paper	NOUN
fumecheng-7594	283	6	,	,	PUNCT
fumecheng-7594	283	7	we	we	PRON
fumecheng-7594	283	8	continue	continue	VERB
fumecheng-7594	283	9	extending	extend	VERB
fumecheng-7594	283	10	the	the	DET
fumecheng-7594	283	11	formulations	formulation	NOUN
fumecheng-7594	283	12	in	in	ADP
fumecheng-7594	283	13	such	such	DET
fumecheng-7594	283	14	a	a	DET
fumecheng-7594	283	15	way	way	NOUN
fumecheng-7594	283	16	that	that	PRON
fumecheng-7594	283	17	influences	influence	NOUN
fumecheng-7594	283	18	of	of	ADP
fumecheng-7594	283	19	the	the	DET
fumecheng-7594	283	20	tolerance	tolerance	NOUN
fumecheng-7594	283	21	are	be	AUX
fumecheng-7594	283	22	considered	consider	VERB
fumecheng-7594	283	23	(	(	PUNCT
fumecheng-7594	283	24	see	see	VERB
fumecheng-7594	283	25	eqs	eqs	X
fumecheng-7594	283	26	.	.	PUNCT
fumecheng-7594	284	1	(	(	PUNCT
fumecheng-7594	284	2	6	6	NUM
fumecheng-7594	284	3	)	)	PUNCT
fumecheng-7594	284	4	and	and	CCONJ
fumecheng-7594	284	5	(	(	PUNCT
fumecheng-7594	284	6	10	10	NUM
fumecheng-7594	284	7	)	)	PUNCT
fumecheng-7594	284	8	–	–	PUNCT
fumecheng-7594	284	9	(	(	PUNCT
fumecheng-7594	284	10	13	13	NUM
fumecheng-7594	284	11	)	)	PUNCT
fumecheng-7594	284	12	)	)	PUNCT
fumecheng-7594	284	13	.	.	PUNCT
fumecheng-7594	285	1	in	in	ADP
fumecheng-7594	285	2	this	this	DET
fumecheng-7594	285	3	extension	extension	NOUN
fumecheng-7594	285	4	,	,	PUNCT
fumecheng-7594	285	5	the	the	DET
fumecheng-7594	285	6	critical	critical	ADJ
fumecheng-7594	285	7	amplitude	amplitude	NOUN
fumecheng-7594	285	8	is	be	AUX
fumecheng-7594	285	9	a	a	DET
fumecheng-7594	285	10	function	function	NOUN
fumecheng-7594	285	11	of	of	ADP
fumecheng-7594	285	12	the	the	DET
fumecheng-7594	285	13	maximal	maximal	ADJ
fumecheng-7594	285	14	tangential	tangential	ADJ
fumecheng-7594	285	15	displacement	displacement	NOUN
fumecheng-7594	285	16	of	of	ADP
fumecheng-7594	285	17	the	the	DET
fumecheng-7594	285	18	guiding	guide	VERB
fumecheng-7594	285	19	contacts	contact	NOUN
fumecheng-7594	285	20	𝑢𝑥,𝑚𝑎𝑥,𝑗	𝑢𝑥,𝑚𝑎𝑥,𝑗	NOUN
fumecheng-7594	285	21	,	,	PUNCT
fumecheng-7594	285	22	the	the	DET
fumecheng-7594	285	23	tangential	tangential	ADJ
fumecheng-7594	285	24	deformation	deformation	NOUN
fumecheng-7594	285	25	of	of	ADP
fumecheng-7594	285	26	the	the	DET
fumecheng-7594	285	27	piezo	piezo	PROPN
fumecheng-7594	285	28	𝑢𝑥,𝑎,𝑗	𝑢𝑥,𝑎,𝑗	VERB
fumecheng-7594	285	29	under	under	ADP
fumecheng-7594	285	30	consideration	consideration	NOUN
fumecheng-7594	285	31	of	of	ADP
fumecheng-7594	285	32	the	the	DET
fumecheng-7594	285	33	interaction	interaction	NOUN
fumecheng-7594	285	34	between	between	ADP
fumecheng-7594	285	35	the	the	DET
fumecheng-7594	285	36	two	two	NUM
fumecheng-7594	285	37	actuator	actuator	NOUN
fumecheng-7594	285	38	groups	group	NOUN
fumecheng-7594	285	39	,	,	PUNCT
fumecheng-7594	285	40	where	where	SCONJ
fumecheng-7594	285	41	𝑗	𝑗	ADJ
fumecheng-7594	285	42	=	=	SYM
fumecheng-7594	285	43	1	1	NUM
fumecheng-7594	285	44	for	for	ADP
fumecheng-7594	285	45	actuators	actuator	NOUN
fumecheng-7594	285	46	of	of	ADP
fumecheng-7594	285	47	the	the	DET
fumecheng-7594	285	48	type	type	NOUN
fumecheng-7594	285	49	-	-	PUNCT
fumecheng-7594	285	50	a	a	DET
fumecheng-7594	285	51	side	side	NOUN
fumecheng-7594	285	52	and	and	CCONJ
fumecheng-7594	285	53	𝑗	𝑗	NOUN
fumecheng-7594	285	54	=	=	ADJ
fumecheng-7594	285	55	2	2	NUM
fumecheng-7594	285	56	for	for	ADP
fumecheng-7594	285	57	actuators	actuator	NOUN
fumecheng-7594	285	58	of	of	ADP
fumecheng-7594	285	59	the	the	DET
fumecheng-7594	285	60	type	type	NOUN
fumecheng-7594	285	61	-	-	PUNCT
fumecheng-7594	285	62	b	b	NOUN
fumecheng-7594	285	63	side	side	NOUN
fumecheng-7594	285	64	.	.	PUNCT
fumecheng-7594	286	1	the	the	DET
fumecheng-7594	286	2	influence	influence	NOUN
fumecheng-7594	286	3	of	of	ADP
fumecheng-7594	286	4	the	the	DET
fumecheng-7594	286	5	tolerance	tolerance	NOUN
fumecheng-7594	286	6	of	of	ADP
fumecheng-7594	286	7	𝛾	𝛾	PROPN
fumecheng-7594	286	8	and	and	CCONJ
fumecheng-7594	286	9	𝛿	𝛿	X
fumecheng-7594	286	10	on	on	ADP
fumecheng-7594	286	11	the	the	DET
fumecheng-7594	286	12	changing	changing	NOUN
fumecheng-7594	286	13	of	of	ADP
fumecheng-7594	286	14	the	the	DET
fumecheng-7594	286	15	displacement	displacement	NOUN
fumecheng-7594	286	16	of	of	ADP
fumecheng-7594	286	17	the	the	DET
fumecheng-7594	286	18	contacts	contact	NOUN
fumecheng-7594	286	19	is	be	AUX
fumecheng-7594	286	20	represented	represent	VERB
fumecheng-7594	286	21	by	by	ADP
fumecheng-7594	286	22	factor	factor	NOUN
fumecheng-7594	286	23	𝐴/𝐴′	𝐴/𝐴′	NOUN
fumecheng-7594	286	24	in	in	ADP
fumecheng-7594	286	25	eq	eq	ADP
fumecheng-7594	286	26	.	.	PUNCT
fumecheng-7594	287	1	(	(	PUNCT
fumecheng-7594	287	2	12	12	NUM
fumecheng-7594	287	3	)	)	PUNCT
fumecheng-7594	287	4	.	.	PUNCT
fumecheng-7594	288	1	also	also	ADV
fumecheng-7594	288	2	,	,	PUNCT
fumecheng-7594	288	3	the	the	DET
fumecheng-7594	288	4	change	change	NOUN
fumecheng-7594	288	5	in	in	ADP
fumecheng-7594	288	6	normal	normal	ADJ
fumecheng-7594	288	7	forces	force	NOUN
fumecheng-7594	288	8	is	be	AUX
fumecheng-7594	288	9	determined	determine	VERB
fumecheng-7594	288	10	by	by	ADP
fumecheng-7594	288	11	eq	eq	PROPN
fumecheng-7594	288	12	.	.	PUNCT
fumecheng-7594	289	1	(	(	PUNCT
fumecheng-7594	289	2	6	6	NUM
fumecheng-7594	289	3	)	)	PUNCT
fumecheng-7594	289	4	.	.	PUNCT
fumecheng-7594	290	1	the	the	DET
fumecheng-7594	290	2	reduction	reduction	NOUN
fumecheng-7594	290	3	of	of	ADP
fumecheng-7594	290	4	the	the	DET
fumecheng-7594	290	5	stiffness	stiffness	NOUN
fumecheng-7594	290	6	is	be	AUX
fumecheng-7594	290	7	modeled	model	VERB
fumecheng-7594	290	8	in	in	ADP
fumecheng-7594	290	9	eq	eq	ADP
fumecheng-7594	290	10	.	.	PUNCT
fumecheng-7594	291	1	(	(	PUNCT
fumecheng-7594	291	2	11	11	NUM
fumecheng-7594	291	3	)	)	PUNCT
fumecheng-7594	291	4	.	.	PUNCT
fumecheng-7594	292	1	fig	fig	NOUN
fumecheng-7594	292	2	.	.	PUNCT
fumecheng-7594	293	1	11b	11b	NOUN
fumecheng-7594	293	2	shows	show	VERB
fumecheng-7594	293	3	the	the	DET
fumecheng-7594	293	4	comparison	comparison	NOUN
fumecheng-7594	293	5	of	of	ADP
fumecheng-7594	293	6	dynamic	dynamic	ADJ
fumecheng-7594	293	7	simulations	simulation	NOUN
fumecheng-7594	293	8	of	of	ADP
fumecheng-7594	293	9	the	the	DET
fumecheng-7594	293	10	critical	critical	ADJ
fumecheng-7594	293	11	amplitude	amplitude	NOUN
fumecheng-7594	293	12	depending	depend	VERB
fumecheng-7594	293	13	on	on	ADP
fumecheng-7594	293	14	the	the	DET
fumecheng-7594	293	15	preload	preload	NOUN
fumecheng-7594	293	16	and	and	CCONJ
fumecheng-7594	293	17	the	the	DET
fumecheng-7594	293	18	analytical	analytical	ADJ
fumecheng-7594	293	19	investigation	investigation	NOUN
fumecheng-7594	293	20	of	of	ADP
fumecheng-7594	293	21	influences	influence	NOUN
fumecheng-7594	293	22	of	of	ADP
fumecheng-7594	293	23	fabrication	fabrication	NOUN
fumecheng-7594	293	24	tolerances	tolerance	NOUN
fumecheng-7594	293	25	on	on	ADP
fumecheng-7594	293	26	operational	operational	ADJ
fumecheng-7594	293	27	characteristics	characteristic	NOUN
fumecheng-7594	293	28	of	of	ADP
fumecheng-7594	293	29	piezo	piezo	NOUN
fumecheng-7594	293	30	-	-	ADJ
fumecheng-7594	293	31	actuated	actuated	ADJ
fumecheng-7594	293	32	...	...	PUNCT
fumecheng-7594	293	33	123	123	NUM
fumecheng-7594	293	34	approximation	approximation	NOUN
fumecheng-7594	293	35	(	(	PUNCT
fumecheng-7594	293	36	13	13	NUM
fumecheng-7594	293	37	)	)	PUNCT
fumecheng-7594	293	38	for	for	ADP
fumecheng-7594	293	39	both	both	DET
fumecheng-7594	293	40	cases	case	NOUN
fumecheng-7594	293	41	of	of	ADP
fumecheng-7594	293	42	the	the	DET
fumecheng-7594	293	43	radius	radius	NOUN
fumecheng-7594	293	44	of	of	ADP
fumecheng-7594	293	45	the	the	DET
fumecheng-7594	293	46	ruby	ruby	PROPN
fumecheng-7594	293	47	hemispheres	hemisphere	NOUN
fumecheng-7594	293	48	.	.	PUNCT
fumecheng-7594	294	1	it	it	PRON
fumecheng-7594	294	2	is	be	AUX
fumecheng-7594	294	3	seen	see	VERB
fumecheng-7594	294	4	that	that	SCONJ
fumecheng-7594	294	5	the	the	DET
fumecheng-7594	294	6	analytical	analytical	ADJ
fumecheng-7594	294	7	approximations	approximation	NOUN
fumecheng-7594	294	8	fit	fit	VERB
fumecheng-7594	294	9	excellently	excellently	ADV
fumecheng-7594	294	10	with	with	ADP
fumecheng-7594	294	11	the	the	DET
fumecheng-7594	294	12	dynamic	dynamic	ADJ
fumecheng-7594	294	13	simulations	simulation	NOUN
fumecheng-7594	294	14	.	.	PUNCT
fumecheng-7594	295	1	fig	fig	NOUN
fumecheng-7594	295	2	.	.	PUNCT
fumecheng-7594	296	1	11	11	NUM
fumecheng-7594	296	2	dependency	dependency	NOUN
fumecheng-7594	296	3	of	of	ADP
fumecheng-7594	296	4	the	the	DET
fumecheng-7594	296	5	critical	critical	ADJ
fumecheng-7594	296	6	amplitude	amplitude	NOUN
fumecheng-7594	296	7	on	on	ADP
fumecheng-7594	296	8	the	the	DET
fumecheng-7594	296	9	preload	preload	NOUN
fumecheng-7594	296	10	:	:	PUNCT
fumecheng-7594	296	11	a	a	X
fumecheng-7594	296	12	)	)	PUNCT
fumecheng-7594	296	13	discrepancies	discrepancy	NOUN
fumecheng-7594	296	14	between	between	ADP
fumecheng-7594	296	15	simulation	simulation	NOUN
fumecheng-7594	296	16	results	result	NOUN
fumecheng-7594	296	17	of	of	ADP
fumecheng-7594	296	18	the	the	DET
fumecheng-7594	296	19	standard	standard	ADJ
fumecheng-7594	296	20	case	case	NOUN
fumecheng-7594	296	21	and	and	CCONJ
fumecheng-7594	296	22	the	the	DET
fumecheng-7594	296	23	varied	varied	ADJ
fumecheng-7594	296	24	case	case	NOUN
fumecheng-7594	296	25	(	(	PUNCT
fumecheng-7594	296	26	𝛾	𝛾	NOUN
fumecheng-7594	296	27	=	=	SYM
fumecheng-7594	296	28	85	85	NUM
fumecheng-7594	296	29	°	°	NUM
fumecheng-7594	296	30	)	)	PUNCT
fumecheng-7594	296	31	;	;	PUNCT
fumecheng-7594	296	32	b	b	X
fumecheng-7594	296	33	)	)	PUNCT
fumecheng-7594	296	34	comparison	comparison	NOUN
fumecheng-7594	296	35	of	of	ADP
fumecheng-7594	296	36	dynamic	dynamic	ADJ
fumecheng-7594	296	37	simulation	simulation	NOUN
fumecheng-7594	296	38	and	and	CCONJ
fumecheng-7594	296	39	analytical	analytical	ADJ
fumecheng-7594	296	40	formation	formation	NOUN
fumecheng-7594	296	41	determined	determine	VERB
fumecheng-7594	296	42	from	from	ADP
fumecheng-7594	296	43	eqs	eqs	PROPN
fumecheng-7594	296	44	.	.	PUNCT
fumecheng-7594	297	1	(	(	PUNCT
fumecheng-7594	297	2	6	6	NUM
fumecheng-7594	297	3	)	)	PUNCT
fumecheng-7594	297	4	and	and	CCONJ
fumecheng-7594	297	5	(	(	PUNCT
fumecheng-7594	297	6	10)–(13	10)–(13	NUM
fumecheng-7594	297	7	)	)	PUNCT
fumecheng-7594	297	8	.	.	PUNCT
fumecheng-7594	298	1	(	(	PUNCT
fumecheng-7594	298	2	)	)	PUNCT
fumecheng-7594	298	3	2	2	NUM
fumecheng-7594	298	4	31	31	NUM
fumecheng-7594	298	5	3	3	NUM
fumecheng-7594	298	6	,	,	PUNCT
fumecheng-7594	298	7	*	*	PUNCT
fumecheng-7594	298	8	1	1	NUM
fumecheng-7594	298	9	3	3	NUM
fumecheng-7594	298	10	3	3	NUM
fumecheng-7594	298	11	4	4	NUM
fumecheng-7594	298	12	*	*	SYM
fumecheng-7594	298	13	1	1	NUM
fumecheng-7594	298	14	,	,	PUNCT
fumecheng-7594	298	15	2	2	NUM
fumecheng-7594	298	16	34	34	NUM
fumecheng-7594	298	17	nj	nj	PROPN
fumecheng-7594	298	18	x	x	PROPN
fumecheng-7594	298	19	max	max	PROPN
fumecheng-7594	298	20	,	,	PUNCT
fumecheng-7594	298	21	j	j	PROPN
fumecheng-7594	298	22	fe	fe	X
fumecheng-7594	298	23	u	u	X
fumecheng-7594	298	24	j	j	PROPN
fumecheng-7594	298	25	g	g	PROPN
fumecheng-7594	298	26	r	r	PROPN
fumecheng-7594	298	27			NOUN
fumecheng-7594	298	28			NOUN
fumecheng-7594	298	29	=	=	PUNCT
fumecheng-7594	299	1	=	=	SYM
fumecheng-7594	299	2			PROPN
fumecheng-7594	299	3			PROPN
fumecheng-7594	299	4			PROPN
fumecheng-7594	299	5			PROPN
fumecheng-7594	299	6			NOUN
fumecheng-7594	299	7	(	(	PUNCT
fumecheng-7594	299	8	10	10	NUM
fumecheng-7594	299	9	)	)	PUNCT
fumecheng-7594	299	10	,	,	PUNCT
fumecheng-7594	299	11	,	,	PUNCT
fumecheng-7594	299	12	(	(	PUNCT
fumecheng-7594	299	13	1	1	NUM
fumecheng-7594	299	14	,	,	PUNCT
fumecheng-7594	299	15	2	2	NUM
fumecheng-7594	299	16	)	)	PUNCT
fumecheng-7594	299	17	nj	nj	PROPN
fumecheng-7594	300	1	r	r	NOUN
fumecheng-7594	300	2	a	a	NOUN
fumecheng-7594	300	3	x	x	X
fumecheng-7594	300	4	a	a	DET
fumecheng-7594	300	5	j	j	NOUN
fumecheng-7594	300	6	pj	pj	PROPN
fumecheng-7594	300	7	r	r	NOUN
fumecheng-7594	300	8	f	f	PROPN
fumecheng-7594	300	9	m	m	VERB
fumecheng-7594	300	10	m	m	VERB
fumecheng-7594	300	11	u	u	NOUN
fumecheng-7594	300	12	j	j	PROPN
fumecheng-7594	300	13	k	k	PROPN
fumecheng-7594	300	14	m	m	PROPN
fumecheng-7594	300	15	+	+	X
fumecheng-7594	300	16	=	=	SYM
fumecheng-7594	300	17			X
fumecheng-7594	300	18			NOUN
fumecheng-7594	300	19	=	=	NOUN
fumecheng-7594	300	20			NOUN
fumecheng-7594	300	21	(	(	PUNCT
fumecheng-7594	300	22	11	11	NUM
fumecheng-7594	300	23	)	)	PUNCT
fumecheng-7594	300	24	,	,	PUNCT
fumecheng-7594	300	25	,	,	PUNCT
fumecheng-7594	300	26	,	,	PUNCT
fumecheng-7594	300	27	max	max	PROPN
fumecheng-7594	300	28	,	,	PUNCT
fumecheng-7594	300	29	,	,	PUNCT
fumecheng-7594	300	30	,	,	PUNCT
fumecheng-7594	300	31	'	'	PUNCT
fumecheng-7594	300	32	'	'	PUNCT
fumecheng-7594	300	33	(	(	PUNCT
fumecheng-7594	300	34	1	1	NUM
fumecheng-7594	300	35	,	,	PUNCT
fumecheng-7594	300	36	2)x	2)x	NUM
fumecheng-7594	300	37	max	max	PROPN
fumecheng-7594	300	38	j	j	PROPN
fumecheng-7594	300	39	x	x	SYM
fumecheng-7594	300	40	j	j	PROPN
fumecheng-7594	300	41	x	x	X
fumecheng-7594	300	42	a	a	DET
fumecheng-7594	300	43	j	j	PROPN
fumecheng-7594	300	44	a	a	DET
fumecheng-7594	300	45	u	u	X
fumecheng-7594	300	46	u	u	X
fumecheng-7594	300	47	u	u	NOUN
fumecheng-7594	300	48	j	j	PROPN
fumecheng-7594	300	49	a	a	X
fumecheng-7594	300	50	=	=	X
fumecheng-7594	301	1	+	+	NUM
fumecheng-7594	301	2	=	=	SYM
fumecheng-7594	301	3	(	(	PUNCT
fumecheng-7594	301	4	12	12	NUM
fumecheng-7594	301	5	)	)	PUNCT
fumecheng-7594	301	6	,	,	PUNCT
fumecheng-7594	301	7	max,1	max,1	NOUN
fumecheng-7594	301	8	,	,	PUNCT
fumecheng-7594	301	9	max,2	max,2	NOUN
fumecheng-7594	301	10	,	,	PUNCT
fumecheng-7594	301	11	,	,	PUNCT
fumecheng-7594	301	12	,	,	PUNCT
fumecheng-7594	301	13	max,1	max,1	NOUN
fumecheng-7594	301	14	,	,	PUNCT
fumecheng-7594	301	15	max,2	max,2	NOUN
fumecheng-7594	301	16	2	2	NUM
fumecheng-7594	301	17	'	'	PUNCT
fumecheng-7594	301	18	'	'	PUNCT
fumecheng-7594	301	19	'	'	PUNCT
fumecheng-7594	301	20	'	'	PUNCT
fumecheng-7594	301	21	'	'	PUNCT
fumecheng-7594	302	1	x	x	SYM
fumecheng-7594	302	2	x	x	PUNCT
fumecheng-7594	302	3	x	x	X
fumecheng-7594	302	4	max	max	PROPN
fumecheng-7594	302	5	e	e	NOUN
fumecheng-7594	302	6	x	x	PUNCT
fumecheng-7594	302	7	x	x	PUNCT
fumecheng-7594	302	8	u	u	VERB
fumecheng-7594	302	9	u	u	X
fumecheng-7594	302	10	u	u	NOUN
fumecheng-7594	302	11	u	u	NOUN
fumecheng-7594	302	12	u	u	NOUN
fumecheng-7594	302	13	=	=	X
fumecheng-7594	302	14	+	+	CCONJ
fumecheng-7594	302	15	(	(	PUNCT
fumecheng-7594	302	16	13	13	NUM
fumecheng-7594	302	17	)	)	PUNCT
fumecheng-7594	302	18	4.3	4.3	NUM
fumecheng-7594	302	19	.	.	PUNCT
fumecheng-7594	303	1	the	the	DET
fumecheng-7594	303	2	maximal	maximal	ADJ
fumecheng-7594	303	3	achievable	achievable	ADJ
fumecheng-7594	303	4	driving	drive	VERB
fumecheng-7594	303	5	frequency	frequency	NOUN
fumecheng-7594	303	6	/	/	SYM
fumecheng-7594	303	7	velocity	velocity	NOUN
fumecheng-7594	303	8	one	one	NUM
fumecheng-7594	303	9	important	important	ADJ
fumecheng-7594	303	10	characteristic	characteristic	NOUN
fumecheng-7594	303	11	of	of	ADP
fumecheng-7594	303	12	the	the	DET
fumecheng-7594	303	13	drive	drive	NOUN
fumecheng-7594	303	14	is	be	AUX
fumecheng-7594	303	15	the	the	DET
fumecheng-7594	303	16	maximal	maximal	ADJ
fumecheng-7594	303	17	-	-	PUNCT
fumecheng-7594	303	18	achievable	achievable	ADJ
fumecheng-7594	303	19	velocity	velocity	NOUN
fumecheng-7594	303	20	of	of	ADP
fumecheng-7594	303	21	the	the	DET
fumecheng-7594	303	22	runner	runner	NOUN
fumecheng-7594	303	23	,	,	PUNCT
fumecheng-7594	303	24	depending	depend	VERB
fumecheng-7594	303	25	on	on	ADP
fumecheng-7594	303	26	the	the	DET
fumecheng-7594	303	27	driving	drive	VERB
fumecheng-7594	303	28	frequency	frequency	NOUN
fumecheng-7594	303	29	.	.	PUNCT
fumecheng-7594	304	1	in	in	ADP
fumecheng-7594	304	2	fact	fact	NOUN
fumecheng-7594	304	3	,	,	PUNCT
fumecheng-7594	304	4	after	after	ADP
fumecheng-7594	304	5	each	each	DET
fumecheng-7594	304	6	slip	slip	NOUN
fumecheng-7594	304	7	phase	phase	NOUN
fumecheng-7594	304	8	,	,	PUNCT
fumecheng-7594	304	9	there	there	PRON
fumecheng-7594	304	10	appear	appear	VERB
fumecheng-7594	304	11	micro	micro	NOUN
fumecheng-7594	304	12	-	-	NOUN
fumecheng-7594	304	13	vibrations	vibration	NOUN
fumecheng-7594	304	14	of	of	ADP
fumecheng-7594	304	15	the	the	DET
fumecheng-7594	304	16	overall	overall	ADJ
fumecheng-7594	304	17	system	system	NOUN
fumecheng-7594	304	18	.	.	PUNCT
fumecheng-7594	305	1	if	if	SCONJ
fumecheng-7594	305	2	the	the	DET
fumecheng-7594	305	3	micro	micro	NOUN
fumecheng-7594	305	4	-	-	NOUN
fumecheng-7594	305	5	vibration	vibration	NOUN
fumecheng-7594	305	6	can	can	AUX
fumecheng-7594	305	7	not	not	PART
fumecheng-7594	305	8	be	be	AUX
fumecheng-7594	305	9	damped	damp	VERB
fumecheng-7594	305	10	before	before	SCONJ
fumecheng-7594	305	11	a	a	DET
fumecheng-7594	305	12	new	new	ADJ
fumecheng-7594	305	13	cycle	cycle	NOUN
fumecheng-7594	305	14	of	of	ADP
fumecheng-7594	305	15	the	the	DET
fumecheng-7594	305	16	stick	stick	NOUN
fumecheng-7594	305	17	and	and	CCONJ
fumecheng-7594	305	18	slip	slip	NOUN
fumecheng-7594	305	19	phase	phase	NOUN
fumecheng-7594	305	20	is	be	AUX
fumecheng-7594	305	21	started	start	VERB
fumecheng-7594	305	22	,	,	PUNCT
fumecheng-7594	305	23	it	it	PRON
fumecheng-7594	305	24	will	will	AUX
fumecheng-7594	305	25	induce	induce	VERB
fumecheng-7594	305	26	chaos	chaos	NOUN
fumecheng-7594	305	27	to	to	ADP
fumecheng-7594	305	28	the	the	DET
fumecheng-7594	305	29	system	system	NOUN
fumecheng-7594	305	30	.	.	PUNCT
fumecheng-7594	306	1	this	this	PRON
fumecheng-7594	306	2	prevents	prevent	VERB
fumecheng-7594	306	3	us	we	PRON
fumecheng-7594	306	4	from	from	ADP
fumecheng-7594	306	5	controlling	control	VERB
fumecheng-7594	306	6	the	the	DET
fumecheng-7594	306	7	drive	drive	NOUN
fumecheng-7594	306	8	at	at	ADP
fumecheng-7594	306	9	high	high	ADJ
fumecheng-7594	306	10	driving	drive	VERB
fumecheng-7594	306	11	frequencies	frequency	NOUN
fumecheng-7594	306	12	,	,	PUNCT
fumecheng-7594	306	13	influencing	influence	VERB
fumecheng-7594	306	14	directly	directly	ADV
fumecheng-7594	306	15	to	to	ADP
fumecheng-7594	306	16	the	the	DET
fumecheng-7594	306	17	velocity	velocity	NOUN
fumecheng-7594	306	18	of	of	ADP
fumecheng-7594	306	19	the	the	DET
fumecheng-7594	306	20	runner	runner	NOUN
fumecheng-7594	306	21	.	.	PUNCT
fumecheng-7594	307	1	thus	thus	ADV
fumecheng-7594	307	2	,	,	PUNCT
fumecheng-7594	307	3	we	we	PRON
fumecheng-7594	307	4	can	can	AUX
fumecheng-7594	307	5	only	only	ADV
fumecheng-7594	307	6	drive	drive	VERB
fumecheng-7594	307	7	the	the	DET
fumecheng-7594	307	8	system	system	NOUN
fumecheng-7594	307	9	at	at	ADP
fumecheng-7594	307	10	a	a	DET
fumecheng-7594	307	11	maximal	maximal	ADJ
fumecheng-7594	307	12	-	-	PUNCT
fumecheng-7594	307	13	achievable	achievable	ADJ
fumecheng-7594	307	14	driving	driving	NOUN
fumecheng-7594	307	15	frequency	frequency	NOUN
fumecheng-7594	307	16	.	.	PUNCT
fumecheng-7594	308	1	above	above	ADP
fumecheng-7594	308	2	this	this	DET
fumecheng-7594	308	3	frequency	frequency	NOUN
fumecheng-7594	308	4	level	level	NOUN
fumecheng-7594	308	5	,	,	PUNCT
fumecheng-7594	308	6	the	the	DET
fumecheng-7594	308	7	velocity	velocity	NOUN
fumecheng-7594	308	8	of	of	ADP
fumecheng-7594	308	9	the	the	DET
fumecheng-7594	308	10	runner	runner	NOUN
fumecheng-7594	308	11	is	be	AUX
fumecheng-7594	308	12	reduced	reduce	VERB
fumecheng-7594	308	13	.	.	PUNCT
fumecheng-7594	309	1	the	the	DET
fumecheng-7594	309	2	micro	micro	NOUN
fumecheng-7594	309	3	-	-	NOUN
fumecheng-7594	309	4	vibration	vibration	NOUN
fumecheng-7594	309	5	depends	depend	VERB
fumecheng-7594	309	6	on	on	ADP
fumecheng-7594	309	7	the	the	DET
fumecheng-7594	309	8	mechanics	mechanic	NOUN
fumecheng-7594	309	9	of	of	ADP
fumecheng-7594	309	10	the	the	DET
fumecheng-7594	309	11	guiding	guide	VERB
fumecheng-7594	309	12	contacts	contact	NOUN
fumecheng-7594	309	13	,	,	PUNCT
fumecheng-7594	309	14	the	the	DET
fumecheng-7594	309	15	preload	preload	NOUN
fumecheng-7594	309	16	,	,	PUNCT
fumecheng-7594	309	17	and	and	CCONJ
fumecheng-7594	309	18	the	the	DET
fumecheng-7594	309	19	dynamics	dynamic	NOUN
fumecheng-7594	309	20	of	of	ADP
fumecheng-7594	309	21	the	the	DET
fumecheng-7594	309	22	piezo	piezo	X
fumecheng-7594	309	23	actuators	actuator	NOUN
fumecheng-7594	309	24	,	,	PUNCT
fumecheng-7594	309	25	which	which	PRON
fumecheng-7594	309	26	is	be	AUX
fumecheng-7594	309	27	influenced	influence	VERB
fumecheng-7594	309	28	by	by	ADP
fumecheng-7594	309	29	the	the	DET
fumecheng-7594	309	30	fabrication	fabrication	NOUN
fumecheng-7594	309	31	and	and	CCONJ
fumecheng-7594	309	32	assembly	assembly	NOUN
fumecheng-7594	309	33	tolerance	tolerance	NOUN
fumecheng-7594	309	34	.	.	PUNCT
fumecheng-7594	310	1	fig	fig	NOUN
fumecheng-7594	310	2	.	.	PUNCT
fumecheng-7594	311	1	12	12	NUM
fumecheng-7594	311	2	shows	show	VERB
fumecheng-7594	311	3	a	a	DET
fumecheng-7594	311	4	comparison	comparison	NOUN
fumecheng-7594	311	5	of	of	ADP
fumecheng-7594	311	6	the	the	DET
fumecheng-7594	311	7	maximal	maximal	ADJ
fumecheng-7594	311	8	-	-	PUNCT
fumecheng-7594	311	9	achievable	achievable	ADJ
fumecheng-7594	311	10	velocity	velocity	NOUN
fumecheng-7594	311	11	of	of	ADP
fumecheng-7594	311	12	the	the	DET
fumecheng-7594	311	13	runner	runner	NOUN
fumecheng-7594	311	14	(	(	PUNCT
fumecheng-7594	311	15	b	b	NOUN
fumecheng-7594	311	16	)	)	PUNCT
fumecheng-7594	311	17	(	(	PUNCT
fumecheng-7594	311	18	a	a	X
fumecheng-7594	311	19	)	)	PUNCT
fumecheng-7594	311	20	124	124	NUM
fumecheng-7594	311	21	h.	h.	PROPN
fumecheng-7594	311	22	x.	x.	PROPN
fumecheng-7594	311	23	nguyen	nguyen	PROPN
fumecheng-7594	311	24	,	,	PUNCT
fumecheng-7594	311	25	a.	a.	PROPN
fumecheng-7594	311	26	h.	h.	PROPN
fumecheng-7594	311	27	nguyen	nguyen	PROPN
fumecheng-7594	312	1	depending	depend	VERB
fumecheng-7594	312	2	on	on	ADP
fumecheng-7594	312	3	the	the	DET
fumecheng-7594	312	4	preload	preload	NOUN
fumecheng-7594	312	5	between	between	ADP
fumecheng-7594	312	6	the	the	DET
fumecheng-7594	312	7	standard	standard	ADJ
fumecheng-7594	312	8	case	case	NOUN
fumecheng-7594	312	9	and	and	CCONJ
fumecheng-7594	312	10	the	the	DET
fumecheng-7594	312	11	varied	varied	ADJ
fumecheng-7594	312	12	cases	case	NOUN
fumecheng-7594	312	13	.	.	PUNCT
fumecheng-7594	313	1	for	for	ADP
fumecheng-7594	313	2	each	each	DET
fumecheng-7594	313	3	level	level	NOUN
fumecheng-7594	313	4	of	of	ADP
fumecheng-7594	313	5	the	the	DET
fumecheng-7594	313	6	preload	preload	NOUN
fumecheng-7594	313	7	,	,	PUNCT
fumecheng-7594	313	8	the	the	DET
fumecheng-7594	313	9	value	value	NOUN
fumecheng-7594	313	10	of	of	ADP
fumecheng-7594	313	11	the	the	DET
fumecheng-7594	313	12	maximalachievable	maximalachievable	ADJ
fumecheng-7594	313	13	driving	driving	NOUN
fumecheng-7594	313	14	frequency	frequency	NOUN
fumecheng-7594	313	15	is	be	AUX
fumecheng-7594	313	16	shown	show	VERB
fumecheng-7594	313	17	.	.	PUNCT
fumecheng-7594	314	1	it	it	PRON
fumecheng-7594	314	2	is	be	AUX
fumecheng-7594	314	3	seen	see	VERB
fumecheng-7594	314	4	in	in	ADP
fumecheng-7594	314	5	fig	fig	NOUN
fumecheng-7594	314	6	.	.	PUNCT
fumecheng-7594	315	1	12a	12a	NOUN
fumecheng-7594	315	2	that	that	SCONJ
fumecheng-7594	315	3	,	,	PUNCT
fumecheng-7594	315	4	for	for	ADP
fumecheng-7594	315	5	all	all	DET
fumecheng-7594	315	6	cases	case	NOUN
fumecheng-7594	315	7	,	,	PUNCT
fumecheng-7594	315	8	if	if	SCONJ
fumecheng-7594	315	9	the	the	DET
fumecheng-7594	315	10	preload	preload	NOUN
fumecheng-7594	315	11	rises	rise	VERB
fumecheng-7594	315	12	,	,	PUNCT
fumecheng-7594	315	13	the	the	DET
fumecheng-7594	315	14	maximal	maximal	ADJ
fumecheng-7594	315	15	-	-	PUNCT
fumecheng-7594	315	16	achievable	achievable	ADJ
fumecheng-7594	315	17	driving	driving	NOUN
fumecheng-7594	315	18	frequencies	frequency	NOUN
fumecheng-7594	315	19	and	and	CCONJ
fumecheng-7594	315	20	thus	thus	ADV
fumecheng-7594	315	21	the	the	DET
fumecheng-7594	315	22	maximal	maximal	ADJ
fumecheng-7594	315	23	-	-	PUNCT
fumecheng-7594	315	24	achievable	achievable	ADJ
fumecheng-7594	315	25	velocity	velocity	NOUN
fumecheng-7594	315	26	of	of	ADP
fumecheng-7594	315	27	the	the	DET
fumecheng-7594	315	28	runner	runner	NOUN
fumecheng-7594	315	29	is	be	AUX
fumecheng-7594	315	30	decreased	decrease	VERB
fumecheng-7594	315	31	.	.	PUNCT
fumecheng-7594	316	1	for	for	ADP
fumecheng-7594	316	2	the	the	DET
fumecheng-7594	316	3	case	case	NOUN
fumecheng-7594	316	4	with	with	ADP
fumecheng-7594	316	5	𝛿	𝛿	PROPN
fumecheng-7594	316	6	=	=	NUM
fumecheng-7594	316	7	80	80	NUM
fumecheng-7594	316	8	°	°	NUM
fumecheng-7594	316	9	or	or	CCONJ
fumecheng-7594	316	10	100	100	NUM
fumecheng-7594	316	11	°	°	NOUN
fumecheng-7594	316	12	only	only	ADV
fumecheng-7594	316	13	the	the	DET
fumecheng-7594	316	14	displacement	displacement	ADJ
fumecheng-7594	316	15	amplitude	amplitude	NOUN
fumecheng-7594	316	16	of	of	ADP
fumecheng-7594	316	17	the	the	DET
fumecheng-7594	316	18	guiding	guide	VERB
fumecheng-7594	316	19	contacts	contact	NOUN
fumecheng-7594	316	20	is	be	AUX
fumecheng-7594	316	21	slightly	slightly	ADV
fumecheng-7594	316	22	changed	change	VERB
fumecheng-7594	316	23	and	and	CCONJ
fumecheng-7594	316	24	thus	thus	ADV
fumecheng-7594	316	25	,	,	PUNCT
fumecheng-7594	316	26	it	it	PRON
fumecheng-7594	316	27	will	will	AUX
fumecheng-7594	316	28	not	not	PART
fumecheng-7594	316	29	influence	influence	VERB
fumecheng-7594	316	30	significantly	significantly	ADV
fumecheng-7594	316	31	on	on	ADP
fumecheng-7594	316	32	the	the	DET
fumecheng-7594	316	33	result	result	NOUN
fumecheng-7594	316	34	when	when	SCONJ
fumecheng-7594	316	35	comparing	compare	VERB
fumecheng-7594	316	36	with	with	ADP
fumecheng-7594	316	37	the	the	DET
fumecheng-7594	316	38	standard	standard	ADJ
fumecheng-7594	316	39	case	case	NOUN
fumecheng-7594	316	40	.	.	PUNCT
fumecheng-7594	317	1	the	the	DET
fumecheng-7594	317	2	two	two	NUM
fumecheng-7594	317	3	plots	plot	NOUN
fumecheng-7594	317	4	of	of	ADP
fumecheng-7594	317	5	these	these	DET
fumecheng-7594	317	6	cases	case	NOUN
fumecheng-7594	317	7	are	be	AUX
fumecheng-7594	317	8	mostly	mostly	ADV
fumecheng-7594	317	9	identical	identical	ADJ
fumecheng-7594	317	10	.	.	PUNCT
fumecheng-7594	318	1	for	for	ADP
fumecheng-7594	318	2	the	the	DET
fumecheng-7594	318	3	case	case	NOUN
fumecheng-7594	318	4	𝛾	𝛾	ADP
fumecheng-7594	318	5	=	=	SYM
fumecheng-7594	318	6	85	85	NUM
fumecheng-7594	318	7	°	°	NUM
fumecheng-7594	318	8	,	,	PUNCT
fumecheng-7594	318	9	the	the	DET
fumecheng-7594	318	10	displacement	displacement	ADJ
fumecheng-7594	318	11	amplitude	amplitude	NOUN
fumecheng-7594	318	12	of	of	ADP
fumecheng-7594	318	13	the	the	DET
fumecheng-7594	318	14	guiding	guide	VERB
fumecheng-7594	318	15	contacts	contact	NOUN
fumecheng-7594	318	16	is	be	AUX
fumecheng-7594	318	17	reduced	reduce	VERB
fumecheng-7594	318	18	,	,	PUNCT
fumecheng-7594	318	19	and	and	CCONJ
fumecheng-7594	318	20	the	the	DET
fumecheng-7594	318	21	normal	normal	ADJ
fumecheng-7594	318	22	contact	contact	NOUN
fumecheng-7594	318	23	forces	force	NOUN
fumecheng-7594	318	24	are	be	AUX
fumecheng-7594	318	25	increased	increase	VERB
fumecheng-7594	318	26	.	.	PUNCT
fumecheng-7594	319	1	compared	compare	VERB
fumecheng-7594	319	2	to	to	ADP
fumecheng-7594	319	3	the	the	DET
fumecheng-7594	319	4	standard	standard	ADJ
fumecheng-7594	319	5	case	case	NOUN
fumecheng-7594	319	6	,	,	PUNCT
fumecheng-7594	319	7	this	this	DET
fumecheng-7594	319	8	case	case	NOUN
fumecheng-7594	319	9	leads	lead	VERB
fumecheng-7594	319	10	to	to	ADP
fumecheng-7594	319	11	reductions	reduction	NOUN
fumecheng-7594	319	12	of	of	ADP
fumecheng-7594	319	13	the	the	DET
fumecheng-7594	319	14	maximal	maximal	ADJ
fumecheng-7594	319	15	-	-	PUNCT
fumecheng-7594	319	16	achievable	achievable	ADJ
fumecheng-7594	319	17	velocity	velocity	NOUN
fumecheng-7594	319	18	of	of	ADP
fumecheng-7594	319	19	the	the	DET
fumecheng-7594	319	20	runner	runner	NOUN
fumecheng-7594	319	21	with	with	ADP
fumecheng-7594	319	22	a	a	DET
fumecheng-7594	319	23	maximal	maximal	ADJ
fumecheng-7594	319	24	discrepancy	discrepancy	NOUN
fumecheng-7594	319	25	of	of	ADP
fumecheng-7594	319	26	6	6	NUM
fumecheng-7594	319	27	%	%	NOUN
fumecheng-7594	319	28	.	.	PUNCT
fumecheng-7594	320	1	when	when	SCONJ
fumecheng-7594	320	2	both	both	PRON
fumecheng-7594	320	3	stiffness	stiffness	NOUN
fumecheng-7594	320	4	and	and	CCONJ
fumecheng-7594	320	5	damping	damp	VERB
fumecheng-7594	320	6	ratio	ratio	NOUN
fumecheng-7594	320	7	are	be	AUX
fumecheng-7594	320	8	reduced	reduce	VERB
fumecheng-7594	320	9	to	to	ADP
fumecheng-7594	320	10	20	20	NUM
fumecheng-7594	320	11	%	%	NOUN
fumecheng-7594	320	12	,	,	PUNCT
fumecheng-7594	320	13	the	the	DET
fumecheng-7594	320	14	velocity	velocity	NOUN
fumecheng-7594	320	15	is	be	AUX
fumecheng-7594	320	16	slightly	slightly	ADV
fumecheng-7594	320	17	increased	increase	VERB
fumecheng-7594	320	18	.	.	PUNCT
fumecheng-7594	321	1	this	this	PRON
fumecheng-7594	321	2	can	can	AUX
fumecheng-7594	321	3	be	be	AUX
fumecheng-7594	321	4	explained	explain	VERB
fumecheng-7594	321	5	that	that	SCONJ
fumecheng-7594	321	6	the	the	DET
fumecheng-7594	321	7	reduction	reduction	NOUN
fumecheng-7594	321	8	of	of	ADP
fumecheng-7594	321	9	the	the	DET
fumecheng-7594	321	10	damping	damp	VERB
fumecheng-7594	321	11	ratio	ratio	NOUN
fumecheng-7594	321	12	leads	lead	VERB
fumecheng-7594	321	13	to	to	ADP
fumecheng-7594	321	14	the	the	DET
fumecheng-7594	321	15	increasing	increase	VERB
fumecheng-7594	321	16	step	step	NOUN
fumecheng-7594	321	17	length	length	NOUN
fumecheng-7594	321	18	.	.	PUNCT
fumecheng-7594	322	1	this	this	DET
fumecheng-7594	322	2	increasing	increase	VERB
fumecheng-7594	322	3	level	level	NOUN
fumecheng-7594	322	4	is	be	AUX
fumecheng-7594	322	5	larger	large	ADJ
fumecheng-7594	322	6	than	than	ADP
fumecheng-7594	322	7	the	the	DET
fumecheng-7594	322	8	decreasing	decrease	VERB
fumecheng-7594	322	9	step	step	NOUN
fumecheng-7594	322	10	length	length	NOUN
fumecheng-7594	322	11	caused	cause	VERB
fumecheng-7594	322	12	by	by	ADP
fumecheng-7594	322	13	the	the	DET
fumecheng-7594	322	14	reducing	reduce	VERB
fumecheng-7594	322	15	stiffness	stiffness	NOUN
fumecheng-7594	322	16	.	.	PUNCT
fumecheng-7594	323	1	consequently	consequently	ADV
fumecheng-7594	323	2	,	,	PUNCT
fumecheng-7594	323	3	the	the	DET
fumecheng-7594	323	4	final	final	ADJ
fumecheng-7594	323	5	step	step	NOUN
fumecheng-7594	323	6	length	length	NOUN
fumecheng-7594	323	7	is	be	AUX
fumecheng-7594	323	8	increased	increase	VERB
fumecheng-7594	323	9	,	,	PUNCT
fumecheng-7594	323	10	leading	lead	VERB
fumecheng-7594	323	11	to	to	ADP
fumecheng-7594	323	12	an	an	DET
fumecheng-7594	323	13	increment	increment	NOUN
fumecheng-7594	323	14	of	of	ADP
fumecheng-7594	323	15	velocity	velocity	NOUN
fumecheng-7594	323	16	for	for	ADP
fumecheng-7594	323	17	the	the	DET
fumecheng-7594	323	18	runner	runner	NOUN
fumecheng-7594	323	19	.	.	PUNCT
fumecheng-7594	324	1	the	the	DET
fumecheng-7594	324	2	maximal	maximal	ADJ
fumecheng-7594	324	3	discrepancy	discrepancy	NOUN
fumecheng-7594	324	4	for	for	ADP
fumecheng-7594	324	5	this	this	DET
fumecheng-7594	324	6	case	case	NOUN
fumecheng-7594	324	7	is	be	AUX
fumecheng-7594	324	8	4	4	NUM
fumecheng-7594	324	9	%	%	NOUN
fumecheng-7594	324	10	.	.	PUNCT
fumecheng-7594	325	1	simulation	simulation	NOUN
fumecheng-7594	325	2	results	result	VERB
fumecheng-7594	325	3	for	for	ADP
fumecheng-7594	325	4	the	the	DET
fumecheng-7594	325	5	case	case	NOUN
fumecheng-7594	325	6	with	with	ADP
fumecheng-7594	325	7	𝑅	𝑅	PROPN
fumecheng-7594	325	8	=	=	PUNCT
fumecheng-7594	325	9	0.25𝑚𝑚	0.25𝑚𝑚	NOUN
fumecheng-7594	325	10	are	be	AUX
fumecheng-7594	325	11	shown	show	VERB
fumecheng-7594	325	12	in	in	ADP
fumecheng-7594	325	13	fig	fig	NOUN
fumecheng-7594	325	14	.	.	PUNCT
fumecheng-7594	326	1	12b	12b	NOUN
fumecheng-7594	326	2	.	.	PUNCT
fumecheng-7594	327	1	a	a	DET
fumecheng-7594	327	2	similar	similar	ADJ
fumecheng-7594	327	3	trend	trend	NOUN
fumecheng-7594	327	4	as	as	ADP
fumecheng-7594	327	5	in	in	ADP
fumecheng-7594	327	6	fig	fig	NOUN
fumecheng-7594	327	7	.	.	PUNCT
fumecheng-7594	328	1	12a	12a	NOUN
fumecheng-7594	328	2	is	be	AUX
fumecheng-7594	328	3	detected	detect	VERB
fumecheng-7594	328	4	.	.	PUNCT
fumecheng-7594	329	1	the	the	DET
fumecheng-7594	329	2	maximal	maximal	ADJ
fumecheng-7594	329	3	discrepancy	discrepancy	NOUN
fumecheng-7594	329	4	is	be	AUX
fumecheng-7594	329	5	5	5	NUM
fumecheng-7594	329	6	%	%	NOUN
fumecheng-7594	329	7	.	.	PUNCT
fumecheng-7594	330	1	however	however	ADV
fumecheng-7594	330	2	,	,	PUNCT
fumecheng-7594	330	3	the	the	DET
fumecheng-7594	330	4	maximal	maximal	ADJ
fumecheng-7594	330	5	fig	fig	NOUN
fumecheng-7594	330	6	.	.	PUNCT
fumecheng-7594	331	1	12	12	NUM
fumecheng-7594	331	2	comparison	comparison	NOUN
fumecheng-7594	331	3	of	of	ADP
fumecheng-7594	331	4	the	the	DET
fumecheng-7594	331	5	maximal	maximal	ADJ
fumecheng-7594	331	6	-	-	PUNCT
fumecheng-7594	331	7	achievable	achievable	ADJ
fumecheng-7594	331	8	velocity	velocity	NOUN
fumecheng-7594	331	9	of	of	ADP
fumecheng-7594	331	10	the	the	DET
fumecheng-7594	331	11	runner	runner	NOUN
fumecheng-7594	331	12	depending	depend	VERB
fumecheng-7594	331	13	on	on	ADP
fumecheng-7594	331	14	the	the	DET
fumecheng-7594	331	15	preload	preload	NOUN
fumecheng-7594	331	16	between	between	ADP
fumecheng-7594	331	17	the	the	DET
fumecheng-7594	331	18	standard	standard	ADJ
fumecheng-7594	331	19	case	case	NOUN
fumecheng-7594	331	20	and	and	CCONJ
fumecheng-7594	331	21	the	the	DET
fumecheng-7594	331	22	varied	varied	ADJ
fumecheng-7594	331	23	cases	case	NOUN
fumecheng-7594	331	24	:	:	PUNCT
fumecheng-7594	331	25	a	a	X
fumecheng-7594	331	26	)	)	PUNCT
fumecheng-7594	331	27	𝑅	𝑅	NOUN
fumecheng-7594	331	28	=	=	PUNCT
fumecheng-7594	331	29	1𝑚𝑚	1𝑚𝑚	NOUN
fumecheng-7594	331	30	;	;	PUNCT
fumecheng-7594	331	31	b	b	X
fumecheng-7594	331	32	)	)	PUNCT
fumecheng-7594	331	33	𝑅	𝑅	NOUN
fumecheng-7594	331	34	=	=	NOUN
fumecheng-7594	331	35	0.25𝑚𝑚	0.25𝑚𝑚	NOUN
fumecheng-7594	331	36	;	;	PUNCT
fumecheng-7594	331	37	c	c	X
fumecheng-7594	331	38	)	)	PUNCT
fumecheng-7594	331	39	𝑅	𝑅	PROPN
fumecheng-7594	331	40	=	=	PROPN
fumecheng-7594	331	41	0.5𝑚𝑚	0.5𝑚𝑚	PROPN
fumecheng-7594	331	42	(	(	PUNCT
fumecheng-7594	331	43	b	b	NOUN
fumecheng-7594	331	44	)	)	PUNCT
fumecheng-7594	331	45	(	(	PUNCT
fumecheng-7594	331	46	a	a	NOUN
fumecheng-7594	331	47	)	)	PUNCT
fumecheng-7594	331	48	(	(	PUNCT
fumecheng-7594	331	49	c	c	X
fumecheng-7594	331	50	)	)	PUNCT
fumecheng-7594	331	51	investigation	investigation	NOUN
fumecheng-7594	331	52	of	of	ADP
fumecheng-7594	331	53	influences	influence	NOUN
fumecheng-7594	331	54	of	of	ADP
fumecheng-7594	331	55	fabrication	fabrication	NOUN
fumecheng-7594	331	56	tolerances	tolerance	NOUN
fumecheng-7594	331	57	on	on	ADP
fumecheng-7594	331	58	operational	operational	ADJ
fumecheng-7594	331	59	characteristics	characteristic	NOUN
fumecheng-7594	331	60	of	of	ADP
fumecheng-7594	331	61	piezo	piezo	NOUN
fumecheng-7594	331	62	-	-	ADJ
fumecheng-7594	331	63	actuated	actuated	ADJ
fumecheng-7594	331	64	...	...	PUNCT
fumecheng-7594	331	65	125	125	NUM
fumecheng-7594	331	66	achievable	achievable	ADJ
fumecheng-7594	331	67	driving	driving	NOUN
fumecheng-7594	331	68	frequency	frequency	NOUN
fumecheng-7594	331	69	and	and	CCONJ
fumecheng-7594	331	70	thus	thus	ADV
fumecheng-7594	331	71	the	the	DET
fumecheng-7594	331	72	velocity	velocity	NOUN
fumecheng-7594	331	73	of	of	ADP
fumecheng-7594	331	74	the	the	DET
fumecheng-7594	331	75	runner	runner	NOUN
fumecheng-7594	331	76	is	be	AUX
fumecheng-7594	331	77	reduced	reduce	VERB
fumecheng-7594	331	78	significantly	significantly	ADV
fumecheng-7594	331	79	.	.	PUNCT
fumecheng-7594	332	1	fig	fig	NOUN
fumecheng-7594	332	2	.	.	PUNCT
fumecheng-7594	333	1	12c	12c	NUM
fumecheng-7594	333	2	shows	show	VERB
fumecheng-7594	333	3	simulation	simulation	NOUN
fumecheng-7594	333	4	results	result	NOUN
fumecheng-7594	333	5	for	for	ADP
fumecheng-7594	333	6	the	the	DET
fumecheng-7594	333	7	case	case	NOUN
fumecheng-7594	333	8	𝑅	𝑅	PROPN
fumecheng-7594	333	9	=	=	PROPN
fumecheng-7594	333	10	0.5𝑚𝑚.	0.5𝑚𝑚.	PROPN
fumecheng-7594	333	11	a	a	DET
fumecheng-7594	333	12	similar	similar	ADJ
fumecheng-7594	333	13	trend	trend	NOUN
fumecheng-7594	333	14	is	be	AUX
fumecheng-7594	333	15	also	also	ADV
fumecheng-7594	333	16	obtained	obtain	VERB
fumecheng-7594	333	17	.	.	PUNCT
fumecheng-7594	334	1	at	at	ADP
fumecheng-7594	334	2	the	the	DET
fumecheng-7594	334	3	preload	preload	NOUN
fumecheng-7594	334	4	𝐹𝑁	𝐹𝑁	PROPN
fumecheng-7594	334	5	=	=	SYM
fumecheng-7594	334	6	0.4𝑁	0.4𝑁	NOUN
fumecheng-7594	334	7	,	,	PUNCT
fumecheng-7594	334	8	the	the	DET
fumecheng-7594	334	9	maximal	maximal	ADJ
fumecheng-7594	334	10	-	-	PUNCT
fumecheng-7594	334	11	achievable	achievable	ADJ
fumecheng-7594	334	12	velocity	velocity	NOUN
fumecheng-7594	334	13	of	of	ADP
fumecheng-7594	334	14	the	the	DET
fumecheng-7594	334	15	runner	runner	NOUN
fumecheng-7594	334	16	reaches	reach	VERB
fumecheng-7594	334	17	1.62𝑚𝑚/𝑠	1.62𝑚𝑚/𝑠	PROPN
fumecheng-7594	334	18	at	at	ADP
fumecheng-7594	334	19	a	a	DET
fumecheng-7594	334	20	maximal	maximal	ADJ
fumecheng-7594	334	21	-	-	PUNCT
fumecheng-7594	334	22	controllable	controllable	ADJ
fumecheng-7594	334	23	driving	driving	NOUN
fumecheng-7594	334	24	frequency	frequency	NOUN
fumecheng-7594	334	25	of	of	ADP
fumecheng-7594	334	26	31𝑘𝐻𝑧.	31𝑘𝐻𝑧.	NUM
fumecheng-7594	334	27	when	when	SCONJ
fumecheng-7594	334	28	considering	consider	VERB
fumecheng-7594	334	29	the	the	DET
fumecheng-7594	334	30	influence	influence	NOUN
fumecheng-7594	334	31	of	of	ADP
fumecheng-7594	334	32	the	the	DET
fumecheng-7594	334	33	fabrication	fabrication	NOUN
fumecheng-7594	334	34	and	and	CCONJ
fumecheng-7594	334	35	assembly	assembly	NOUN
fumecheng-7594	334	36	tolerance	tolerance	NOUN
fumecheng-7594	334	37	,	,	PUNCT
fumecheng-7594	334	38	the	the	DET
fumecheng-7594	334	39	maximal	maximal	ADJ
fumecheng-7594	334	40	discrepancy	discrepancy	NOUN
fumecheng-7594	334	41	is	be	AUX
fumecheng-7594	334	42	6.4	6.4	NUM
fumecheng-7594	334	43	%	%	NOUN
fumecheng-7594	334	44	.	.	PUNCT
fumecheng-7594	335	1	compared	compare	VERB
fumecheng-7594	335	2	to	to	ADP
fumecheng-7594	335	3	the	the	DET
fumecheng-7594	335	4	experimental	experimental	ADJ
fumecheng-7594	335	5	data	datum	NOUN
fumecheng-7594	335	6	shown	show	VERB
fumecheng-7594	335	7	in	in	ADP
fumecheng-7594	335	8	fig.5	fig.5	PROPN
fumecheng-7594	335	9	,	,	PUNCT
fumecheng-7594	335	10	where	where	SCONJ
fumecheng-7594	335	11	the	the	DET
fumecheng-7594	335	12	maximal	maximal	ADJ
fumecheng-7594	335	13	velocity	velocity	NOUN
fumecheng-7594	335	14	is	be	AUX
fumecheng-7594	335	15	1.76𝑚𝑚/𝑠	1.76𝑚𝑚/𝑠	NUM
fumecheng-7594	335	16	at	at	ADP
fumecheng-7594	335	17	a	a	DET
fumecheng-7594	335	18	driving	drive	VERB
fumecheng-7594	335	19	frequency	frequency	NOUN
fumecheng-7594	335	20	of	of	ADP
fumecheng-7594	335	21	26𝑘𝐻𝑧	26𝑘𝐻𝑧	PROPN
fumecheng-7594	335	22	and	and	CCONJ
fumecheng-7594	335	23	the	the	DET
fumecheng-7594	335	24	maximal	maximal	ADJ
fumecheng-7594	335	25	discrepancy	discrepancy	NOUN
fumecheng-7594	335	26	is	be	AUX
fumecheng-7594	335	27	of	of	ADP
fumecheng-7594	335	28	7.4	7.4	NUM
fumecheng-7594	335	29	%	%	NOUN
fumecheng-7594	335	30	,	,	PUNCT
fumecheng-7594	335	31	it	it	PRON
fumecheng-7594	335	32	is	be	AUX
fumecheng-7594	335	33	observed	observe	VERB
fumecheng-7594	335	34	that	that	SCONJ
fumecheng-7594	335	35	the	the	DET
fumecheng-7594	335	36	simulation	simulation	NOUN
fumecheng-7594	335	37	fits	fit	VERB
fumecheng-7594	335	38	very	very	ADV
fumecheng-7594	335	39	well	well	ADV
fumecheng-7594	335	40	with	with	ADP
fumecheng-7594	335	41	the	the	DET
fumecheng-7594	335	42	experiment	experiment	NOUN
fumecheng-7594	335	43	.	.	PUNCT
fumecheng-7594	336	1	it	it	PRON
fumecheng-7594	336	2	can	can	AUX
fumecheng-7594	336	3	be	be	AUX
fumecheng-7594	336	4	concluded	conclude	VERB
fumecheng-7594	336	5	that	that	SCONJ
fumecheng-7594	336	6	the	the	DET
fumecheng-7594	336	7	maximal	maximal	ADJ
fumecheng-7594	336	8	-	-	PUNCT
fumecheng-7594	336	9	achievable	achievable	ADJ
fumecheng-7594	336	10	driving	driving	NOUN
fumecheng-7594	336	11	frequency	frequency	NOUN
fumecheng-7594	336	12	/	/	SYM
fumecheng-7594	336	13	velocity	velocity	NOUN
fumecheng-7594	336	14	depends	depend	VERB
fumecheng-7594	336	15	strongly	strongly	ADV
fumecheng-7594	336	16	on	on	ADP
fumecheng-7594	336	17	the	the	DET
fumecheng-7594	336	18	size	size	NOUN
fumecheng-7594	336	19	of	of	ADP
fumecheng-7594	336	20	the	the	DET
fumecheng-7594	336	21	system	system	NOUN
fumecheng-7594	336	22	.	.	PUNCT
fumecheng-7594	337	1	when	when	SCONJ
fumecheng-7594	337	2	the	the	DET
fumecheng-7594	337	3	size	size	NOUN
fumecheng-7594	337	4	of	of	ADP
fumecheng-7594	337	5	the	the	DET
fumecheng-7594	337	6	system	system	NOUN
fumecheng-7594	337	7	decreases	decrease	VERB
fumecheng-7594	337	8	,	,	PUNCT
fumecheng-7594	337	9	the	the	DET
fumecheng-7594	337	10	maximalachieve	maximalachieve	NOUN
fumecheng-7594	337	11	driving	driving	NOUN
fumecheng-7594	337	12	frequency	frequency	NOUN
fumecheng-7594	337	13	/	/	SYM
fumecheng-7594	337	14	velocity	velocity	NOUN
fumecheng-7594	337	15	as	as	ADV
fumecheng-7594	337	16	well	well	ADV
fumecheng-7594	337	17	as	as	ADP
fumecheng-7594	337	18	the	the	DET
fumecheng-7594	337	19	repeatability	repeatability	NOUN
fumecheng-7594	337	20	reduce	reduce	VERB
fumecheng-7594	337	21	.	.	PUNCT
fumecheng-7594	338	1	the	the	DET
fumecheng-7594	338	2	influence	influence	NOUN
fumecheng-7594	338	3	of	of	ADP
fumecheng-7594	338	4	the	the	DET
fumecheng-7594	338	5	fabrication	fabrication	NOUN
fumecheng-7594	338	6	and	and	CCONJ
fumecheng-7594	338	7	assembly	assembly	NOUN
fumecheng-7594	338	8	tolerance	tolerance	NOUN
fumecheng-7594	338	9	becomes	become	VERB
fumecheng-7594	338	10	larger	large	ADJ
fumecheng-7594	338	11	.	.	PUNCT
fumecheng-7594	339	1	5	5	X
fumecheng-7594	339	2	.	.	X
fumecheng-7594	339	3	conclusion	conclusion	NOUN
fumecheng-7594	339	4	and	and	CCONJ
fumecheng-7594	339	5	outlook	outlook	NOUN
fumecheng-7594	339	6	in	in	ADP
fumecheng-7594	339	7	this	this	DET
fumecheng-7594	339	8	work	work	NOUN
fumecheng-7594	339	9	,	,	PUNCT
fumecheng-7594	339	10	influences	influence	NOUN
fumecheng-7594	339	11	of	of	ADP
fumecheng-7594	339	12	the	the	DET
fumecheng-7594	339	13	fabrication	fabrication	NOUN
fumecheng-7594	339	14	and	and	CCONJ
fumecheng-7594	339	15	assembly	assembly	NOUN
fumecheng-7594	339	16	tolerance	tolerance	NOUN
fumecheng-7594	339	17	on	on	ADP
fumecheng-7594	339	18	operational	operational	ADJ
fumecheng-7594	339	19	characteristics	characteristic	NOUN
fumecheng-7594	339	20	of	of	ADP
fumecheng-7594	339	21	passmds	passmds	NOUN
fumecheng-7594	339	22	have	have	AUX
fumecheng-7594	339	23	been	be	AUX
fumecheng-7594	339	24	investigated	investigate	VERB
fumecheng-7594	339	25	for	for	ADP
fumecheng-7594	339	26	the	the	DET
fumecheng-7594	339	27	first	first	ADJ
fumecheng-7594	339	28	time	time	NOUN
fumecheng-7594	339	29	.	.	PUNCT
fumecheng-7594	340	1	three	three	NUM
fumecheng-7594	340	2	possible	possible	ADJ
fumecheng-7594	340	3	cases	case	NOUN
fumecheng-7594	340	4	which	which	PRON
fumecheng-7594	340	5	are	be	AUX
fumecheng-7594	340	6	caused	cause	VERB
fumecheng-7594	340	7	the	the	DET
fumecheng-7594	340	8	fabrication	fabrication	NOUN
fumecheng-7594	340	9	and	and	CCONJ
fumecheng-7594	340	10	assembly	assembly	NOUN
fumecheng-7594	340	11	tolerance	tolerance	NOUN
fumecheng-7594	340	12	are	be	AUX
fumecheng-7594	340	13	analyzed	analyze	VERB
fumecheng-7594	340	14	and	and	CCONJ
fumecheng-7594	340	15	chosen	choose	VERB
fumecheng-7594	340	16	to	to	PART
fumecheng-7594	340	17	investigate	investigate	VERB
fumecheng-7594	340	18	.	.	PUNCT
fumecheng-7594	341	1	based	base	VERB
fumecheng-7594	341	2	on	on	ADP
fumecheng-7594	341	3	a	a	DET
fumecheng-7594	341	4	passmd	passmd	NOUN
fumecheng-7594	341	5	and	and	CCONJ
fumecheng-7594	341	6	a	a	DET
fumecheng-7594	341	7	model	model	NOUN
fumecheng-7594	341	8	of	of	ADP
fumecheng-7594	341	9	the	the	DET
fumecheng-7594	341	10	previously	previously	ADV
fumecheng-7594	341	11	published	publish	VERB
fumecheng-7594	341	12	work	work	NOUN
fumecheng-7594	341	13	,	,	PUNCT
fumecheng-7594	341	14	an	an	DET
fumecheng-7594	341	15	extended	extended	ADJ
fumecheng-7594	341	16	model	model	NOUN
fumecheng-7594	341	17	has	have	AUX
fumecheng-7594	341	18	been	be	AUX
fumecheng-7594	341	19	introduced	introduce	VERB
fumecheng-7594	341	20	.	.	PUNCT
fumecheng-7594	342	1	the	the	DET
fumecheng-7594	342	2	model	model	NOUN
fumecheng-7594	342	3	allows	allow	VERB
fumecheng-7594	342	4	considering	consider	VERB
fumecheng-7594	342	5	parameters	parameter	NOUN
fumecheng-7594	342	6	representing	represent	VERB
fumecheng-7594	342	7	influences	influence	NOUN
fumecheng-7594	342	8	of	of	ADP
fumecheng-7594	342	9	the	the	DET
fumecheng-7594	342	10	fabrication	fabrication	NOUN
fumecheng-7594	342	11	and	and	CCONJ
fumecheng-7594	342	12	assembly	assembly	NOUN
fumecheng-7594	342	13	tolerance	tolerance	NOUN
fumecheng-7594	342	14	.	.	PUNCT
fumecheng-7594	343	1	under	under	ADP
fumecheng-7594	343	2	these	these	DET
fumecheng-7594	343	3	influences	influence	NOUN
fumecheng-7594	343	4	,	,	PUNCT
fumecheng-7594	343	5	three	three	NUM
fumecheng-7594	343	6	important	important	ADJ
fumecheng-7594	343	7	operational	operational	ADJ
fumecheng-7594	343	8	characteristics	characteristic	NOUN
fumecheng-7594	343	9	of	of	ADP
fumecheng-7594	343	10	the	the	DET
fumecheng-7594	343	11	drive	drive	NOUN
fumecheng-7594	343	12	,	,	PUNCT
fumecheng-7594	343	13	including	include	VERB
fumecheng-7594	343	14	the	the	DET
fumecheng-7594	343	15	repeatability	repeatability	NOUN
fumecheng-7594	343	16	of	of	ADP
fumecheng-7594	343	17	the	the	DET
fumecheng-7594	343	18	step	step	NOUN
fumecheng-7594	343	19	length	length	NOUN
fumecheng-7594	343	20	,	,	PUNCT
fumecheng-7594	343	21	the	the	DET
fumecheng-7594	343	22	critical	critical	ADJ
fumecheng-7594	343	23	amplitude	amplitude	NOUN
fumecheng-7594	343	24	and	and	CCONJ
fumecheng-7594	343	25	the	the	DET
fumecheng-7594	343	26	maximal	maximal	ADJ
fumecheng-7594	343	27	-	-	PUNCT
fumecheng-7594	343	28	achievable	achievable	ADJ
fumecheng-7594	343	29	driving	driving	NOUN
fumecheng-7594	343	30	frequency	frequency	NOUN
fumecheng-7594	343	31	/	/	SYM
fumecheng-7594	343	32	velocity	velocity	NOUN
fumecheng-7594	343	33	have	have	AUX
fumecheng-7594	343	34	been	be	AUX
fumecheng-7594	343	35	evaluated	evaluate	VERB
fumecheng-7594	343	36	via	via	ADP
fumecheng-7594	343	37	the	the	DET
fumecheng-7594	343	38	more	more	ADV
fumecheng-7594	343	39	general	general	ADJ
fumecheng-7594	343	40	hybrid	hybrid	ADJ
fumecheng-7594	343	41	-	-	PUNCT
fumecheng-7594	343	42	dynamic	dynamic	ADJ
fumecheng-7594	343	43	simulations	simulation	NOUN
fumecheng-7594	343	44	.	.	PUNCT
fumecheng-7594	344	1	it	it	PRON
fumecheng-7594	344	2	is	be	AUX
fumecheng-7594	344	3	concluded	conclude	VERB
fumecheng-7594	344	4	that	that	SCONJ
fumecheng-7594	344	5	the	the	DET
fumecheng-7594	344	6	repeatability	repeatability	NOUN
fumecheng-7594	344	7	of	of	ADP
fumecheng-7594	344	8	the	the	DET
fumecheng-7594	344	9	step	step	NOUN
fumecheng-7594	344	10	length	length	NOUN
fumecheng-7594	344	11	is	be	AUX
fumecheng-7594	344	12	clearly	clearly	ADV
fumecheng-7594	344	13	influenced	influence	VERB
fumecheng-7594	344	14	by	by	ADP
fumecheng-7594	344	15	the	the	DET
fumecheng-7594	344	16	fabrication	fabrication	NOUN
fumecheng-7594	344	17	and	and	CCONJ
fumecheng-7594	344	18	assembly	assembly	NOUN
fumecheng-7594	344	19	tolerance	tolerance	NOUN
fumecheng-7594	344	20	.	.	PUNCT
fumecheng-7594	345	1	the	the	DET
fumecheng-7594	345	2	discrepancy	discrepancy	NOUN
fumecheng-7594	345	3	among	among	ADP
fumecheng-7594	345	4	step	step	NOUN
fumecheng-7594	345	5	lengths	length	NOUN
fumecheng-7594	345	6	is	be	AUX
fumecheng-7594	345	7	gradually	gradually	ADV
fumecheng-7594	345	8	increased	increase	VERB
fumecheng-7594	345	9	if	if	SCONJ
fumecheng-7594	345	10	the	the	DET
fumecheng-7594	345	11	preload	preload	NOUN
fumecheng-7594	345	12	rises	rise	VERB
fumecheng-7594	345	13	and	and	CCONJ
fumecheng-7594	345	14	the	the	DET
fumecheng-7594	345	15	size	size	NOUN
fumecheng-7594	345	16	of	of	ADP
fumecheng-7594	345	17	the	the	DET
fumecheng-7594	345	18	system	system	NOUN
fumecheng-7594	345	19	is	be	AUX
fumecheng-7594	345	20	reduced	reduce	VERB
fumecheng-7594	345	21	.	.	PUNCT
fumecheng-7594	346	1	for	for	ADP
fumecheng-7594	346	2	all	all	DET
fumecheng-7594	346	3	possible	possible	ADJ
fumecheng-7594	346	4	cases	case	NOUN
fumecheng-7594	346	5	caused	cause	VERB
fumecheng-7594	346	6	by	by	ADP
fumecheng-7594	346	7	the	the	DET
fumecheng-7594	346	8	tolerance	tolerance	NOUN
fumecheng-7594	346	9	investigated	investigate	VERB
fumecheng-7594	346	10	in	in	ADP
fumecheng-7594	346	11	this	this	DET
fumecheng-7594	346	12	paper	paper	NOUN
fumecheng-7594	346	13	,	,	PUNCT
fumecheng-7594	346	14	the	the	DET
fumecheng-7594	346	15	influence	influence	NOUN
fumecheng-7594	346	16	of	of	ADP
fumecheng-7594	346	17	the	the	DET
fumecheng-7594	346	18	fabrication	fabrication	NOUN
fumecheng-7594	346	19	tolerance	tolerance	NOUN
fumecheng-7594	346	20	of	of	ADP
fumecheng-7594	346	21	the	the	DET
fumecheng-7594	346	22	runner	runner	NOUN
fumecheng-7594	346	23	represented	represent	VERB
fumecheng-7594	346	24	by	by	ADP
fumecheng-7594	346	25	the	the	DET
fumecheng-7594	346	26	angle	angle	NOUN
fumecheng-7594	346	27	𝛾	𝛾	NOUN
fumecheng-7594	346	28	is	be	AUX
fumecheng-7594	346	29	largest	large	ADJ
fumecheng-7594	346	30	since	since	SCONJ
fumecheng-7594	346	31	it	it	PRON
fumecheng-7594	346	32	modifies	modify	VERB
fumecheng-7594	346	33	not	not	PART
fumecheng-7594	346	34	only	only	ADV
fumecheng-7594	346	35	the	the	DET
fumecheng-7594	346	36	displacement	displacement	ADJ
fumecheng-7594	346	37	amplitude	amplitude	NOUN
fumecheng-7594	346	38	of	of	ADP
fumecheng-7594	346	39	the	the	DET
fumecheng-7594	346	40	contact	contact	NOUN
fumecheng-7594	346	41	point	point	NOUN
fumecheng-7594	346	42	but	but	CCONJ
fumecheng-7594	346	43	also	also	ADV
fumecheng-7594	346	44	the	the	DET
fumecheng-7594	346	45	normal	normal	ADJ
fumecheng-7594	346	46	contact	contact	NOUN
fumecheng-7594	346	47	forces	force	NOUN
fumecheng-7594	346	48	.	.	PUNCT
fumecheng-7594	347	1	the	the	DET
fumecheng-7594	347	2	influence	influence	NOUN
fumecheng-7594	347	3	caused	cause	VERB
fumecheng-7594	347	4	by	by	ADP
fumecheng-7594	347	5	the	the	DET
fumecheng-7594	347	6	assembly	assembly	NOUN
fumecheng-7594	347	7	tolerance	tolerance	NOUN
fumecheng-7594	347	8	of	of	ADP
fumecheng-7594	347	9	the	the	DET
fumecheng-7594	347	10	actuator	actuator	NOUN
fumecheng-7594	347	11	block	block	NOUN
fumecheng-7594	347	12	described	describe	VERB
fumecheng-7594	347	13	by	by	ADP
fumecheng-7594	347	14	𝛿	𝛿	PROPN
fumecheng-7594	347	15	is	be	AUX
fumecheng-7594	347	16	less	less	ADJ
fumecheng-7594	347	17	of	of	ADP
fumecheng-7594	347	18	impact	impact	NOUN
fumecheng-7594	347	19	.	.	PUNCT
fumecheng-7594	348	1	the	the	DET
fumecheng-7594	348	2	changes	change	NOUN
fumecheng-7594	348	3	in	in	ADP
fumecheng-7594	348	4	the	the	DET
fumecheng-7594	348	5	stiffness	stiffness	NOUN
fumecheng-7594	348	6	and	and	CCONJ
fumecheng-7594	348	7	damping	damp	VERB
fumecheng-7594	348	8	ratio	ratio	NOUN
fumecheng-7594	348	9	of	of	ADP
fumecheng-7594	348	10	the	the	DET
fumecheng-7594	348	11	actuator	actuator	NOUN
fumecheng-7594	348	12	influence	influence	NOUN
fumecheng-7594	348	13	all	all	DET
fumecheng-7594	348	14	the	the	DET
fumecheng-7594	348	15	characteristics	characteristic	NOUN
fumecheng-7594	348	16	moderately	moderately	ADV
fumecheng-7594	348	17	.	.	PUNCT
fumecheng-7594	349	1	if	if	SCONJ
fumecheng-7594	349	2	the	the	DET
fumecheng-7594	349	3	stiffness	stiffness	NOUN
fumecheng-7594	349	4	of	of	ADP
fumecheng-7594	349	5	the	the	DET
fumecheng-7594	349	6	actuators	actuator	NOUN
fumecheng-7594	349	7	is	be	AUX
fumecheng-7594	349	8	low	low	ADJ
fumecheng-7594	349	9	,	,	PUNCT
fumecheng-7594	349	10	the	the	DET
fumecheng-7594	349	11	influence	influence	NOUN
fumecheng-7594	349	12	becomes	become	VERB
fumecheng-7594	349	13	apparent	apparent	ADJ
fumecheng-7594	349	14	.	.	PUNCT
fumecheng-7594	350	1	when	when	SCONJ
fumecheng-7594	350	2	the	the	DET
fumecheng-7594	350	3	size	size	NOUN
fumecheng-7594	350	4	of	of	ADP
fumecheng-7594	350	5	the	the	DET
fumecheng-7594	350	6	system	system	NOUN
fumecheng-7594	350	7	reduces	reduce	VERB
fumecheng-7594	350	8	,	,	PUNCT
fumecheng-7594	350	9	the	the	DET
fumecheng-7594	350	10	influence	influence	NOUN
fumecheng-7594	350	11	of	of	ADP
fumecheng-7594	350	12	the	the	DET
fumecheng-7594	350	13	fabrication	fabrication	NOUN
fumecheng-7594	350	14	and	and	CCONJ
fumecheng-7594	350	15	assembly	assembly	NOUN
fumecheng-7594	350	16	tolerance	tolerance	NOUN
fumecheng-7594	350	17	on	on	ADP
fumecheng-7594	350	18	the	the	DET
fumecheng-7594	350	19	driver	driver	NOUN
fumecheng-7594	350	20	’s	’s	PART
fumecheng-7594	350	21	characteristics	characteristic	NOUN
fumecheng-7594	350	22	become	become	VERB
fumecheng-7594	350	23	larger	large	ADJ
fumecheng-7594	350	24	.	.	PUNCT
fumecheng-7594	351	1	the	the	DET
fumecheng-7594	351	2	results	result	NOUN
fumecheng-7594	351	3	of	of	ADP
fumecheng-7594	351	4	this	this	DET
fumecheng-7594	351	5	work	work	NOUN
fumecheng-7594	351	6	would	would	AUX
fumecheng-7594	351	7	be	be	AUX
fumecheng-7594	351	8	very	very	ADV
fumecheng-7594	351	9	helpful	helpful	ADJ
fumecheng-7594	351	10	for	for	ADP
fumecheng-7594	351	11	the	the	DET
fumecheng-7594	351	12	design	design	NOUN
fumecheng-7594	351	13	and	and	CCONJ
fumecheng-7594	351	14	fabrication	fabrication	NOUN
fumecheng-7594	351	15	process	process	NOUN
fumecheng-7594	351	16	of	of	ADP
fumecheng-7594	351	17	passmds	passmds	NOUN
fumecheng-7594	351	18	.	.	PUNCT
fumecheng-7594	352	1	understanding	understand	VERB
fumecheng-7594	352	2	causations	causation	NOUN
fumecheng-7594	352	3	resulting	result	VERB
fumecheng-7594	352	4	from	from	ADP
fumecheng-7594	352	5	the	the	DET
fumecheng-7594	352	6	changes	change	NOUN
fumecheng-7594	352	7	of	of	ADP
fumecheng-7594	352	8	operational	operational	ADJ
fumecheng-7594	352	9	characteristics	characteristic	NOUN
fumecheng-7594	352	10	and	and	CCONJ
fumecheng-7594	352	11	their	their	PRON
fumecheng-7594	352	12	influencing	influence	VERB
fumecheng-7594	352	13	levels	level	NOUN
fumecheng-7594	352	14	allows	allow	VERB
fumecheng-7594	352	15	to	to	PART
fumecheng-7594	352	16	optimize	optimize	VERB
fumecheng-7594	352	17	for	for	ADP
fumecheng-7594	352	18	better	well	ADJ
fumecheng-7594	352	19	generation	generation	NOUN
fumecheng-7594	352	20	of	of	ADP
fumecheng-7594	352	21	passmds	passmds	NOUN
fumecheng-7594	352	22	.	.	PUNCT
fumecheng-7594	353	1	in	in	ADP
fumecheng-7594	353	2	the	the	DET
fumecheng-7594	353	3	future	future	NOUN
fumecheng-7594	353	4	,	,	PUNCT
fumecheng-7594	353	5	an	an	DET
fumecheng-7594	353	6	optimization	optimization	NOUN
fumecheng-7594	353	7	process	process	NOUN
fumecheng-7594	353	8	for	for	ADP
fumecheng-7594	353	9	the	the	DET
fumecheng-7594	353	10	design	design	NOUN
fumecheng-7594	353	11	and	and	CCONJ
fumecheng-7594	353	12	fabrication	fabrication	NOUN
fumecheng-7594	353	13	of	of	ADP
fumecheng-7594	353	14	passmds	passmds	NOUN
fumecheng-7594	353	15	is	be	AUX
fumecheng-7594	353	16	planned	plan	VERB
fumecheng-7594	353	17	to	to	PART
fumecheng-7594	353	18	investigate	investigate	VERB
fumecheng-7594	353	19	.	.	PUNCT
fumecheng-7594	354	1	126	126	NUM
fumecheng-7594	354	2	h.	h.	NOUN
fumecheng-7594	354	3	x.	x.	PROPN
fumecheng-7594	354	4	nguyen	nguyen	PROPN
fumecheng-7594	354	5	,	,	PUNCT
fumecheng-7594	354	6	a.	a.	PROPN
fumecheng-7594	354	7	h.	h.	PROPN
fumecheng-7594	354	8	nguyen	nguyen	PROPN
fumecheng-7594	354	9	references	reference	NOUN
fumecheng-7594	354	10	1	1	NUM
fumecheng-7594	354	11	.	.	PUNCT
fumecheng-7594	354	12	chaillet	chaillet	NOUN
fumecheng-7594	354	13	,	,	PUNCT
fumecheng-7594	354	14	n.	n.	NOUN
fumecheng-7594	354	15	,	,	PUNCT
fumecheng-7594	354	16	régnier	régnier	PROPN
fumecheng-7594	354	17	,	,	PUNCT
fumecheng-7594	354	18	s.	s.	PROPN
fumecheng-7594	354	19	,	,	PUNCT
fumecheng-7594	354	20	2010	2010	NUM
fumecheng-7594	354	21	,	,	PUNCT
fumecheng-7594	354	22	microrobotics	microrobotic	NOUN
fumecheng-7594	354	23	for	for	ADP
fumecheng-7594	354	24	micromanipulation	micromanipulation	NOUN
fumecheng-7594	354	25	,	,	PUNCT
fumecheng-7594	354	26	john	john	PROPN
fumecheng-7594	354	27	wiley	wiley	PROPN
fumecheng-7594	354	28	and	and	CCONJ
fumecheng-7594	354	29	sons	sons	PROPN
fumecheng-7594	354	30	inc	inc	PROPN
fumecheng-7594	354	31	,	,	PUNCT
fumecheng-7594	354	32	usa	usa	PROPN
fumecheng-7594	354	33	,	,	PUNCT
fumecheng-7594	354	34	484	484	NUM
fumecheng-7594	354	35	p.	p.	NOUN
fumecheng-7594	354	36	2	2	NUM
fumecheng-7594	354	37	.	.	PUNCT
fumecheng-7594	355	1	pohl	pohl	PROPN
fumecheng-7594	355	2	,	,	PUNCT
fumecheng-7594	355	3	d.w	d.w	PROPN
fumecheng-7594	355	4	.	.	PROPN
fumecheng-7594	355	5	,	,	PUNCT
fumecheng-7594	355	6	1987	1987	NUM
fumecheng-7594	355	7	,	,	PUNCT
fumecheng-7594	355	8	dynamic	dynamic	ADJ
fumecheng-7594	355	9	piezoelectric	piezoelectric	NOUN
fumecheng-7594	355	10	translation	translation	NOUN
fumecheng-7594	355	11	devices	device	NOUN
fumecheng-7594	355	12	,	,	PUNCT
fumecheng-7594	355	13	review	review	NOUN
fumecheng-7594	355	14	of	of	ADP
fumecheng-7594	355	15	scientific	scientific	ADJ
fumecheng-7594	355	16	instruments	instrument	NOUN
fumecheng-7594	355	17	,	,	PUNCT
fumecheng-7594	355	18	58	58	NUM
fumecheng-7594	355	19	,	,	PUNCT
fumecheng-7594	355	20	pp	pp	ADJ
fumecheng-7594	355	21	.	.	PUNCT
fumecheng-7594	356	1	54	54	NUM
fumecheng-7594	356	2	-	-	SYM
fumecheng-7594	356	3	57	57	NUM
fumecheng-7594	356	4	.	.	PUNCT
fumecheng-7594	357	1	3	3	X
fumecheng-7594	357	2	.	.	X
fumecheng-7594	357	3	nguyen	nguyen	NOUN
fumecheng-7594	357	4	,	,	PUNCT
fumecheng-7594	357	5	h.x	h.x	PROPN
fumecheng-7594	357	6	.	.	PROPN
fumecheng-7594	357	7	,	,	PUNCT
fumecheng-7594	357	8	2014	2014	NUM
fumecheng-7594	357	9	,	,	PUNCT
fumecheng-7594	357	10	simulation	simulation	NOUN
fumecheng-7594	357	11	,	,	PUNCT
fumecheng-7594	357	12	validation	validation	NOUN
fumecheng-7594	357	13	and	and	CCONJ
fumecheng-7594	357	14	optimization	optimization	NOUN
fumecheng-7594	357	15	of	of	ADP
fumecheng-7594	357	16	stick	stick	NOUN
fumecheng-7594	357	17	-	-	PUNCT
fumecheng-7594	357	18	slip	slip	NOUN
fumecheng-7594	357	19	drives	drive	NOUN
fumecheng-7594	357	20	for	for	ADP
fumecheng-7594	357	21	nanorobotic	nanorobotic	ADJ
fumecheng-7594	357	22	applications	application	NOUN
fumecheng-7594	357	23	,	,	PUNCT
fumecheng-7594	357	24	phd	phd	NOUN
fumecheng-7594	357	25	thesis	thesis	NOUN
fumecheng-7594	357	26	,	,	PUNCT
fumecheng-7594	357	27	oldenburg	oldenburg	PROPN
fumecheng-7594	357	28	university	university	PROPN
fumecheng-7594	357	29	,	,	PUNCT
fumecheng-7594	357	30	germany	germany	PROPN
fumecheng-7594	357	31	,	,	PUNCT
fumecheng-7594	357	32	165	165	NUM
fumecheng-7594	357	33	p.	p.	NOUN
fumecheng-7594	357	34	4	4	NUM
fumecheng-7594	357	35	.	.	X
fumecheng-7594	358	1	zhang	zhang	PROPN
fumecheng-7594	358	2	,	,	PUNCT
fumecheng-7594	358	3	z.m	z.m	PROPN
fumecheng-7594	358	4	.	.	PROPN
fumecheng-7594	358	5	,	,	PUNCT
fumecheng-7594	358	6	an	an	PRON
fumecheng-7594	358	7	,	,	PUNCT
fumecheng-7594	358	8	q.	q.	PROPN
fumecheng-7594	358	9	,	,	PUNCT
fumecheng-7594	358	10	li	li	PROPN
fumecheng-7594	358	11	,	,	PUNCT
fumecheng-7594	358	12	j.w	j.w	PROPN
fumecheng-7594	358	13	.	.	PROPN
fumecheng-7594	358	14	,	,	PUNCT
fumecheng-7594	358	15	zhang	zhang	PROPN
fumecheng-7594	358	16	,	,	PUNCT
fumecheng-7594	358	17	w.j	w.j	PROPN
fumecheng-7594	358	18	.	.	PROPN
fumecheng-7594	358	19	,	,	PUNCT
fumecheng-7594	358	20	2012	2012	NUM
fumecheng-7594	358	21	,	,	PUNCT
fumecheng-7594	358	22	piezoelectric	piezoelectric	ADJ
fumecheng-7594	358	23	friction	friction	NOUN
fumecheng-7594	358	24	-	-	PUNCT
fumecheng-7594	358	25	inertia	inertia	NOUN
fumecheng-7594	358	26	actuator	actuator	NOUN
fumecheng-7594	358	27	-	-	PUNCT
fumecheng-7594	358	28	a	a	DET
fumecheng-7594	358	29	critical	critical	ADJ
fumecheng-7594	358	30	review	review	NOUN
fumecheng-7594	358	31	and	and	CCONJ
fumecheng-7594	358	32	future	future	ADJ
fumecheng-7594	358	33	perspective	perspective	NOUN
fumecheng-7594	358	34	,	,	PUNCT
fumecheng-7594	358	35	int	int	PROPN
fumecheng-7594	358	36	j	j	PROPN
fumecheng-7594	358	37	adv	adv	PROPN
fumecheng-7594	358	38	manuf	manuf	PROPN
fumecheng-7594	358	39	technol	technol	NOUN
fumecheng-7594	358	40	,	,	PUNCT
fumecheng-7594	358	41	62	62	NUM
fumecheng-7594	358	42	,	,	PUNCT
fumecheng-7594	358	43	pp	pp	ADJ
fumecheng-7594	358	44	.	.	PUNCT
fumecheng-7594	359	1	669	669	NUM
fumecheng-7594	359	2	-	-	SYM
fumecheng-7594	359	3	685	685	NUM
fumecheng-7594	359	4	.	.	NOUN
fumecheng-7594	360	1	5	5	NUM
fumecheng-7594	360	2	.	.	X
fumecheng-7594	360	3	hunstig	hunstig	PROPN
fumecheng-7594	360	4	,	,	PUNCT
fumecheng-7594	360	5	m.	m.	NOUN
fumecheng-7594	360	6	,	,	PUNCT
fumecheng-7594	360	7	2017	2017	NUM
fumecheng-7594	360	8	,	,	PUNCT
fumecheng-7594	360	9	piezoelectric	piezoelectric	NOUN
fumecheng-7594	360	10	inertia	inertia	NOUN
fumecheng-7594	360	11	motors	motor	NOUN
fumecheng-7594	360	12	—	—	PUNCT
fumecheng-7594	360	13	a	a	DET
fumecheng-7594	360	14	critical	critical	ADJ
fumecheng-7594	360	15	review	review	NOUN
fumecheng-7594	360	16	of	of	ADP
fumecheng-7594	360	17	history	history	NOUN
fumecheng-7594	360	18	,	,	PUNCT
fumecheng-7594	360	19	concepts	concept	NOUN
fumecheng-7594	360	20	,	,	PUNCT
fumecheng-7594	360	21	design	design	NOUN
fumecheng-7594	360	22	,	,	PUNCT
fumecheng-7594	360	23	applications	application	NOUN
fumecheng-7594	360	24	,	,	PUNCT
fumecheng-7594	360	25	and	and	CCONJ
fumecheng-7594	360	26	perspectives	perspective	NOUN
fumecheng-7594	360	27	,	,	PUNCT
fumecheng-7594	360	28	actuator	actuator	NOUN
fumecheng-7594	360	29	,	,	PUNCT
fumecheng-7594	360	30	6(1	6(1	NUM
fumecheng-7594	360	31	)	)	PUNCT
fumecheng-7594	360	32	,	,	PUNCT
fumecheng-7594	360	33	pp.7	pp.7	PROPN
fumecheng-7594	360	34	.	.	PROPN
fumecheng-7594	361	1	6	6	NUM
fumecheng-7594	361	2	.	.	X
fumecheng-7594	361	3	bergander	bergander	PROPN
fumecheng-7594	361	4	,	,	PUNCT
fumecheng-7594	361	5	a.	a.	NOUN
fumecheng-7594	361	6	,	,	PUNCT
fumecheng-7594	361	7	2003	2003	NUM
fumecheng-7594	361	8	,	,	PUNCT
fumecheng-7594	361	9	control	control	NOUN
fumecheng-7594	361	10	,	,	PUNCT
fumecheng-7594	361	11	wear	wear	VERB
fumecheng-7594	361	12	testing	testing	NOUN
fumecheng-7594	361	13	and	and	CCONJ
fumecheng-7594	361	14	integration	integration	NOUN
fumecheng-7594	361	15	of	of	ADP
fumecheng-7594	361	16	stick	stick	NOUN
fumecheng-7594	361	17	-	-	PUNCT
fumecheng-7594	361	18	slip	slip	NOUN
fumecheng-7594	361	19	micropositioning	micropositioning	NOUN
fumecheng-7594	361	20	,	,	PUNCT
fumecheng-7594	361	21	phd	phd	NOUN
fumecheng-7594	361	22	thesis	thesis	NOUN
fumecheng-7594	361	23	,	,	PUNCT
fumecheng-7594	361	24	ecole	ecole	X
fumecheng-7594	361	25	polytechnique	polytechnique	PROPN
fumecheng-7594	361	26	federale	federale	PROPN
fumecheng-7594	361	27	de	de	PROPN
fumecheng-7594	361	28	lausanne	lausanne	PROPN
fumecheng-7594	361	29	,	,	PUNCT
fumecheng-7594	361	30	171	171	NUM
fumecheng-7594	361	31	p.	p.	NOUN
fumecheng-7594	361	32	7	7	NUM
fumecheng-7594	361	33	.	.	PUNCT
fumecheng-7594	362	1	qin	qin	PROPN
fumecheng-7594	362	2	,	,	PUNCT
fumecheng-7594	362	3	f.	f.	PROPN
fumecheng-7594	362	4	,	,	PUNCT
fumecheng-7594	362	5	tian	tian	PROPN
fumecheng-7594	362	6	,	,	PUNCT
fumecheng-7594	362	7	l.	l.	PROPN
fumecheng-7594	362	8	,	,	PUNCT
fumecheng-7594	362	9	huang	huang	PROPN
fumecheng-7594	362	10	,	,	PUNCT
fumecheng-7594	362	11	h.	h.	PROPN
fumecheng-7594	362	12	,	,	PUNCT
fumecheng-7594	362	13	wang	wang	PROPN
fumecheng-7594	362	14	,	,	PUNCT
fumecheng-7594	362	15	j.	j.	PROPN
fumecheng-7594	362	16	,	,	PUNCT
fumecheng-7594	362	17	liang	liang	PROPN
fumecheng-7594	362	18	,	,	PUNCT
fumecheng-7594	362	19	t.	t.	PROPN
fumecheng-7594	362	20	,	,	PUNCT
fumecheng-7594	362	21	zu	zu	PRON
fumecheng-7594	362	22	,	,	PUNCT
fumecheng-7594	362	23	x.	x.	NOUN
fumecheng-7594	362	24	,	,	PUNCT
fumecheng-7594	362	25	zhao	zhao	PROPN
fumecheng-7594	362	26	,	,	PUNCT
fumecheng-7594	362	27	h.	h.	PROPN
fumecheng-7594	362	28	,	,	PUNCT
fumecheng-7594	362	29	2019	2019	NUM
fumecheng-7594	362	30	,	,	PUNCT
fumecheng-7594	362	31	actively	actively	ADV
fumecheng-7594	362	32	controlling	control	VERB
fumecheng-7594	362	33	the	the	DET
fumecheng-7594	362	34	contact	contact	NOUN
fumecheng-7594	362	35	force	force	NOUN
fumecheng-7594	362	36	of	of	ADP
fumecheng-7594	362	37	a	a	DET
fumecheng-7594	362	38	stick	stick	NOUN
fumecheng-7594	362	39	-	-	PUNCT
fumecheng-7594	362	40	slip	slip	NOUN
fumecheng-7594	362	41	piezoelectric	piezoelectric	NOUN
fumecheng-7594	362	42	linear	linear	NOUN
fumecheng-7594	362	43	actuator	actuator	NOUN
fumecheng-7594	362	44	by	by	ADP
fumecheng-7594	362	45	a	a	DET
fumecheng-7594	362	46	composite	composite	ADJ
fumecheng-7594	362	47	flexible	flexible	ADJ
fumecheng-7594	362	48	hinge	hinge	NOUN
fumecheng-7594	362	49	,	,	PUNCT
fumecheng-7594	362	50	sensors	sensor	NOUN
fumecheng-7594	362	51	and	and	CCONJ
fumecheng-7594	362	52	actuators	actuator	NOUN
fumecheng-7594	362	53	a	a	PRON
fumecheng-7594	362	54	:	:	PUNCT
fumecheng-7594	362	55	physical	physical	ADJ
fumecheng-7594	362	56	,	,	PUNCT
fumecheng-7594	362	57	299	299	NUM
fumecheng-7594	362	58	,	,	PUNCT
fumecheng-7594	362	59	111606	111606	NUM
fumecheng-7594	362	60	.	.	PUNCT
fumecheng-7594	363	1	8	8	X
fumecheng-7594	363	2	.	.	PUNCT
fumecheng-7594	364	1	hunstig	hunstig	PROPN
fumecheng-7594	364	2	,	,	PUNCT
fumecheng-7594	364	3	m.	m.	NOUN
fumecheng-7594	364	4	,	,	PUNCT
fumecheng-7594	364	5	hemsel	hemsel	NOUN
fumecheng-7594	364	6	,	,	PUNCT
fumecheng-7594	364	7	t.	t.	PROPN
fumecheng-7594	364	8	,	,	PUNCT
fumecheng-7594	364	9	sextro	sextro	VERB
fumecheng-7594	364	10	,	,	PUNCT
fumecheng-7594	364	11	w.	w.	PROPN
fumecheng-7594	364	12	,	,	PUNCT
fumecheng-7594	364	13	2013	2013	NUM
fumecheng-7594	364	14	,	,	PUNCT
fumecheng-7594	364	15	stick	stick	NOUN
fumecheng-7594	364	16	–	–	PUNCT
fumecheng-7594	364	17	slip	slip	NOUN
fumecheng-7594	364	18	and	and	CCONJ
fumecheng-7594	364	19	slip	slip	NOUN
fumecheng-7594	364	20	–	–	PUNCT
fumecheng-7594	364	21	slip	slip	NOUN
fumecheng-7594	364	22	operation	operation	NOUN
fumecheng-7594	364	23	of	of	ADP
fumecheng-7594	364	24	piezoelectric	piezoelectric	NOUN
fumecheng-7594	364	25	inertia	inertia	NOUN
fumecheng-7594	364	26	drives	drive	NOUN
fumecheng-7594	364	27	.	.	PUNCT
fumecheng-7594	365	1	part	part	NOUN
fumecheng-7594	366	1	i	i	PRON
fumecheng-7594	366	2	:	:	PUNCT
fumecheng-7594	366	3	ideal	ideal	ADJ
fumecheng-7594	366	4	excitation	excitation	NOUN
fumecheng-7594	366	5	,	,	PUNCT
fumecheng-7594	366	6	sensors	sensor	NOUN
fumecheng-7594	366	7	and	and	CCONJ
fumecheng-7594	366	8	actuators	actuator	NOUN
fumecheng-7594	366	9	a	a	PRON
fumecheng-7594	366	10	:	:	PUNCT
fumecheng-7594	366	11	physical	physical	ADJ
fumecheng-7594	366	12	,	,	PUNCT
fumecheng-7594	366	13	200	200	NUM
fumecheng-7594	366	14	,	,	PUNCT
fumecheng-7594	366	15	pp	pp	ADJ
fumecheng-7594	366	16	.	.	PUNCT
fumecheng-7594	367	1	90	90	NUM
fumecheng-7594	367	2	-	-	SYM
fumecheng-7594	367	3	100	100	NUM
fumecheng-7594	367	4	.	.	PUNCT
fumecheng-7594	368	1	9	9	X
fumecheng-7594	368	2	.	.	X
fumecheng-7594	369	1	hunstig	hunstig	PROPN
fumecheng-7594	369	2	,	,	PUNCT
fumecheng-7594	369	3	m.	m.	NOUN
fumecheng-7594	369	4	,	,	PUNCT
fumecheng-7594	369	5	hemsel	hemsel	NOUN
fumecheng-7594	369	6	,	,	PUNCT
fumecheng-7594	369	7	t.	t.	PROPN
fumecheng-7594	369	8	,	,	PUNCT
fumecheng-7594	369	9	sextro	sextro	VERB
fumecheng-7594	369	10	,	,	PUNCT
fumecheng-7594	369	11	w.	w.	PROPN
fumecheng-7594	369	12	,	,	PUNCT
fumecheng-7594	369	13	2013	2013	NUM
fumecheng-7594	369	14	,	,	PUNCT
fumecheng-7594	369	15	stick	stick	NOUN
fumecheng-7594	369	16	-	-	PUNCT
fumecheng-7594	369	17	slip	slip	NOUN
fumecheng-7594	369	18	and	and	CCONJ
fumecheng-7594	369	19	slip	slip	NOUN
fumecheng-7594	369	20	-	-	PUNCT
fumecheng-7594	369	21	slip	slip	NOUN
fumecheng-7594	369	22	operation	operation	NOUN
fumecheng-7594	369	23	of	of	ADP
fumecheng-7594	369	24	piezoelectric	piezoelectric	NOUN
fumecheng-7594	369	25	inertia	inertia	NOUN
fumecheng-7594	369	26	drives	drive	NOUN
fumecheng-7594	369	27	—	—	PUNCT
fumecheng-7594	369	28	part	part	NOUN
fumecheng-7594	369	29	ii	ii	PROPN
fumecheng-7594	369	30	:	:	PUNCT
fumecheng-7594	369	31	frequency	frequency	NOUN
fumecheng-7594	369	32	-	-	PUNCT
fumecheng-7594	369	33	limited	limit	VERB
fumecheng-7594	369	34	excitation	excitation	NOUN
fumecheng-7594	369	35	,	,	PUNCT
fumecheng-7594	369	36	sensors	sensor	NOUN
fumecheng-7594	369	37	and	and	CCONJ
fumecheng-7594	369	38	actuators	actuator	NOUN
fumecheng-7594	369	39	a	a	PRON
fumecheng-7594	369	40	:	:	PUNCT
fumecheng-7594	369	41	physical	physical	ADJ
fumecheng-7594	369	42	,	,	PUNCT
fumecheng-7594	369	43	200	200	NUM
fumecheng-7594	369	44	,	,	PUNCT
fumecheng-7594	369	45	pp	pp	ADJ
fumecheng-7594	369	46	.	.	PUNCT
fumecheng-7594	370	1	79	79	NUM
fumecheng-7594	370	2	-	-	SYM
fumecheng-7594	370	3	89	89	NUM
fumecheng-7594	370	4	.	.	PUNCT
fumecheng-7594	371	1	10	10	NUM
fumecheng-7594	371	2	.	.	PUNCT
fumecheng-7594	372	1	nguyen	nguyen	NOUN
fumecheng-7594	372	2	,	,	PUNCT
fumecheng-7594	372	3	h.x	h.x	PROPN
fumecheng-7594	372	4	.	.	PROPN
fumecheng-7594	372	5	,	,	PUNCT
fumecheng-7594	372	6	teidelt	teidelt	PROPN
fumecheng-7594	372	7	,	,	PUNCT
fumecheng-7594	372	8	e.	e.	PROPN
fumecheng-7594	372	9	,	,	PUNCT
fumecheng-7594	372	10	popov	popov	PROPN
fumecheng-7594	372	11	,	,	PUNCT
fumecheng-7594	372	12	v.l	v.l	PROPN
fumecheng-7594	372	13	.	.	PROPN
fumecheng-7594	372	14	,	,	PUNCT
fumecheng-7594	372	15	fatikow	fatikow	PROPN
fumecheng-7594	372	16	,	,	PUNCT
fumecheng-7594	372	17	s.	s.	PROPN
fumecheng-7594	372	18	,	,	PUNCT
fumecheng-7594	372	19	2014	2014	NUM
fumecheng-7594	372	20	,	,	PUNCT
fumecheng-7594	372	21	modeling	modeling	NOUN
fumecheng-7594	372	22	and	and	CCONJ
fumecheng-7594	372	23	waveform	waveform	VERB
fumecheng-7594	372	24	optimization	optimization	NOUN
fumecheng-7594	372	25	of	of	ADP
fumecheng-7594	372	26	stick	stick	NOUN
fumecheng-7594	372	27	–	–	PUNCT
fumecheng-7594	372	28	slip	slip	NOUN
fumecheng-7594	372	29	micro	micro	NOUN
fumecheng-7594	372	30	-	-	NOUN
fumecheng-7594	372	31	drives	drive	NOUN
fumecheng-7594	372	32	using	use	VERB
fumecheng-7594	372	33	the	the	DET
fumecheng-7594	372	34	method	method	NOUN
fumecheng-7594	372	35	of	of	ADP
fumecheng-7594	372	36	dimensionality	dimensionality	NOUN
fumecheng-7594	372	37	reduction	reduction	NOUN
fumecheng-7594	372	38	,	,	PUNCT
fumecheng-7594	372	39	arch	arch	ADJ
fumecheng-7594	372	40	appl	appl	PROPN
fumecheng-7594	372	41	mech	mech	PROPN
fumecheng-7594	372	42	,	,	PUNCT
fumecheng-7594	372	43	86	86	NUM
fumecheng-7594	372	44	,	,	PUNCT
fumecheng-7594	372	45	pp	pp	ADJ
fumecheng-7594	372	46	.	.	PUNCT
fumecheng-7594	373	1	1771	1771	NUM
fumecheng-7594	373	2	-	-	SYM
fumecheng-7594	373	3	1785	1785	NUM
fumecheng-7594	373	4	.	.	PUNCT
fumecheng-7594	374	1	11	11	NUM
fumecheng-7594	374	2	.	.	PUNCT
fumecheng-7594	374	3	špiller	špiller	NOUN
fumecheng-7594	374	4	,	,	PUNCT
fumecheng-7594	374	5	m.	m.	NOUN
fumecheng-7594	374	6	,	,	PUNCT
fumecheng-7594	374	7	hurák	hurák	PROPN
fumecheng-7594	374	8	,	,	PUNCT
fumecheng-7594	374	9	z.	z.	PROPN
fumecheng-7594	374	10	,	,	PUNCT
fumecheng-7594	374	11	2011	2011	NUM
fumecheng-7594	374	12	,	,	PUNCT
fumecheng-7594	374	13	hybrid	hybrid	ADJ
fumecheng-7594	374	14	charge	charge	NOUN
fumecheng-7594	374	15	control	control	NOUN
fumecheng-7594	374	16	for	for	ADP
fumecheng-7594	374	17	stick	stick	NOUN
fumecheng-7594	374	18	-	-	PUNCT
fumecheng-7594	374	19	slip	slip	NOUN
fumecheng-7594	374	20	piezoelectric	piezoelectric	NOUN
fumecheng-7594	374	21	actuators	actuator	NOUN
fumecheng-7594	374	22	,	,	PUNCT
fumecheng-7594	374	23	mechatronics	mechatronic	NOUN
fumecheng-7594	374	24	,	,	PUNCT
fumecheng-7594	374	25	21(1	21(1	NUM
fumecheng-7594	374	26	)	)	PUNCT
fumecheng-7594	374	27	,	,	PUNCT
fumecheng-7594	374	28	pp	pp	ADP
fumecheng-7594	374	29	.	.	PUNCT
fumecheng-7594	375	1	100	100	NUM
fumecheng-7594	375	2	-	-	SYM
fumecheng-7594	375	3	108	108	NUM
fumecheng-7594	375	4	.	.	PUNCT
fumecheng-7594	376	1	12	12	NUM
fumecheng-7594	376	2	.	.	PUNCT
fumecheng-7594	377	1	hunstig	hunstig	PROPN
fumecheng-7594	377	2	,	,	PUNCT
fumecheng-7594	377	3	m.	m.	NOUN
fumecheng-7594	377	4	,	,	PUNCT
fumecheng-7594	377	5	hemsel	hemsel	NOUN
fumecheng-7594	377	6	,	,	PUNCT
fumecheng-7594	377	7	t.	t.	PROPN
fumecheng-7594	377	8	,	,	PUNCT
fumecheng-7594	377	9	sextro	sextro	VERB
fumecheng-7594	377	10	,	,	PUNCT
fumecheng-7594	377	11	w.	w.	PROPN
fumecheng-7594	377	12	,	,	PUNCT
fumecheng-7594	377	13	2013	2013	NUM
fumecheng-7594	377	14	,	,	PUNCT
fumecheng-7594	377	15	modelling	model	VERB
fumecheng-7594	377	16	the	the	DET
fumecheng-7594	377	17	friction	friction	NOUN
fumecheng-7594	377	18	contact	contact	NOUN
fumecheng-7594	377	19	in	in	ADP
fumecheng-7594	377	20	an	an	DET
fumecheng-7594	377	21	inertia	inertia	NOUN
fumecheng-7594	377	22	motor	motor	NOUN
fumecheng-7594	377	23	,	,	PUNCT
fumecheng-7594	377	24	journal	journal	NOUN
fumecheng-7594	377	25	of	of	ADP
fumecheng-7594	377	26	intelligent	intelligent	ADJ
fumecheng-7594	377	27	material	material	NOUN
fumecheng-7594	377	28	systems	system	NOUN
fumecheng-7594	377	29	and	and	CCONJ
fumecheng-7594	377	30	structures	structure	NOUN
fumecheng-7594	377	31	,	,	PUNCT
fumecheng-7594	377	32	24(11	24(11	NUM
fumecheng-7594	377	33	)	)	PUNCT
fumecheng-7594	377	34	,	,	PUNCT
fumecheng-7594	377	35	pp	pp	ADP
fumecheng-7594	377	36	.	.	PUNCT
fumecheng-7594	378	1	1380	1380	NUM
fumecheng-7594	378	2	-	-	SYM
fumecheng-7594	378	3	1391	1391	NUM
fumecheng-7594	378	4	.	.	PUNCT
fumecheng-7594	379	1	13	13	NUM
fumecheng-7594	379	2	.	.	X
fumecheng-7594	380	1	van	van	PROPN
fumecheng-7594	380	2	der	der	PROPN
fumecheng-7594	380	3	wulp	wulp	PROPN
fumecheng-7594	380	4	,	,	PUNCT
fumecheng-7594	380	5	h.	h.	PROPN
fumecheng-7594	380	6	,	,	PUNCT
fumecheng-7594	380	7	1997	1997	NUM
fumecheng-7594	380	8	,	,	PUNCT
fumecheng-7594	380	9	piezo	piezo	X
fumecheng-7594	380	10	-	-	PUNCT
fumecheng-7594	380	11	driven	drive	VERB
fumecheng-7594	380	12	stages	stage	NOUN
fumecheng-7594	380	13	for	for	ADP
fumecheng-7594	380	14	nanopositioning	nanopositione	VERB
fumecheng-7594	380	15	with	with	ADP
fumecheng-7594	380	16	extreme	extreme	ADJ
fumecheng-7594	380	17	stability	stability	NOUN
fumecheng-7594	380	18	:	:	PUNCT
fumecheng-7594	380	19	theoretical	theoretical	ADJ
fumecheng-7594	380	20	aspects	aspect	NOUN
fumecheng-7594	380	21	and	and	CCONJ
fumecheng-7594	380	22	practical	practical	ADJ
fumecheng-7594	380	23	design	design	NOUN
fumecheng-7594	380	24	considerations	consideration	NOUN
fumecheng-7594	380	25	,	,	PUNCT
fumecheng-7594	380	26	phd	phd	NOUN
fumecheng-7594	380	27	thesis	thesis	NOUN
fumecheng-7594	380	28	,	,	PUNCT
fumecheng-7594	380	29	technische	technische	PROPN
fumecheng-7594	380	30	universiteit	universiteit	PROPN
fumecheng-7594	380	31	delft	delft	PROPN
fumecheng-7594	380	32	,	,	PUNCT
fumecheng-7594	380	33	netherlands	netherlands	PROPN
fumecheng-7594	380	34	.	.	PUNCT
fumecheng-7594	381	1	14	14	NUM
fumecheng-7594	381	2	.	.	PUNCT
fumecheng-7594	382	1	breguet	breguet	PROPN
fumecheng-7594	382	2	,	,	PUNCT
fumecheng-7594	382	3	j	j	PROPN
fumecheng-7594	382	4	-	-	PUNCT
fumecheng-7594	382	5	m.	m.	NOUN
fumecheng-7594	382	6	,	,	PUNCT
fumecheng-7594	382	7	1998	1998	NUM
fumecheng-7594	382	8	,	,	PUNCT
fumecheng-7594	382	9	actionneurs	actionneur	NOUN
fumecheng-7594	382	10	“	"	PUNCT
fumecheng-7594	382	11	stick	stick	NOUN
fumecheng-7594	382	12	and	and	CCONJ
fumecheng-7594	382	13	slip	slip	VERB
fumecheng-7594	382	14	”	"	PUNCT
fumecheng-7594	382	15	pour	pour	PROPN
fumecheng-7594	382	16	micro	micro	NOUN
fumecheng-7594	382	17	-	-	NOUN
fumecheng-7594	382	18	manipulateurs	manipulateur	NOUN
fumecheng-7594	382	19	,	,	PUNCT
fumecheng-7594	382	20	phd	phd	NOUN
fumecheng-7594	382	21	thesis	thesis	NOUN
fumecheng-7594	382	22	,	,	PUNCT
fumecheng-7594	382	23	ecole	ecole	X
fumecheng-7594	382	24	polytechnique	polytechnique	PROPN
fumecheng-7594	382	25	federale	federale	PROPN
fumecheng-7594	382	26	de	de	PROPN
fumecheng-7594	382	27	lausanne	lausanne	PROPN
fumecheng-7594	382	28	,	,	PUNCT
fumecheng-7594	382	29	152	152	NUM
fumecheng-7594	382	30	p.	p.	NOUN
fumecheng-7594	382	31	15	15	NUM
fumecheng-7594	382	32	.	.	PUNCT
fumecheng-7594	383	1	peng	peng	PROPN
fumecheng-7594	383	2	,	,	PUNCT
fumecheng-7594	383	3	j.y	j.y	PROPN
fumecheng-7594	383	4	.	.	PROPN
fumecheng-7594	383	5	,	,	PUNCT
fumecheng-7594	383	6	chen	chen	PROPN
fumecheng-7594	383	7	,	,	PUNCT
fumecheng-7594	383	8	x.b	x.b	PROPN
fumecheng-7594	383	9	,	,	PUNCT
fumecheng-7594	383	10	2011	2011	NUM
fumecheng-7594	383	11	,	,	PUNCT
fumecheng-7594	383	12	modelling	modelling	NOUN
fumecheng-7594	383	13	of	of	ADP
fumecheng-7594	383	14	piezoelectric	piezoelectric	NOUN
fumecheng-7594	383	15	-	-	PUNCT
fumecheng-7594	383	16	driven	drive	VERB
fumecheng-7594	383	17	stick	stick	NOUN
fumecheng-7594	383	18	-	-	PUNCT
fumecheng-7594	383	19	slip	slip	NOUN
fumecheng-7594	383	20	actuator	actuator	NOUN
fumecheng-7594	383	21	,	,	PUNCT
fumecheng-7594	383	22	ieee	ieee	NOUN
fumecheng-7594	383	23	/	/	SYM
fumecheng-7594	383	24	asme	asme	PROPN
fumecheng-7594	383	25	transactions	transaction	NOUN
fumecheng-7594	383	26	on	on	ADP
fumecheng-7594	383	27	mechatronics	mechatronic	NOUN
fumecheng-7594	383	28	,	,	PUNCT
fumecheng-7594	383	29	16(2	16(2	NUM
fumecheng-7594	383	30	)	)	PUNCT
fumecheng-7594	383	31	,	,	PUNCT
fumecheng-7594	383	32	pp	pp	PROPN
fumecheng-7594	383	33	.	.	PUNCT
fumecheng-7594	384	1	394	394	NUM
fumecheng-7594	384	2	-	-	SYM
fumecheng-7594	384	3	399	399	NUM
fumecheng-7594	384	4	.	.	PUNCT
fumecheng-7594	385	1	16	16	NUM
fumecheng-7594	385	2	.	.	PUNCT
fumecheng-7594	385	3	edeler	edeler	PROPN
fumecheng-7594	385	4	,	,	PUNCT
fumecheng-7594	385	5	c.	c.	PROPN
fumecheng-7594	385	6	,	,	PUNCT
fumecheng-7594	385	7	2011	2011	NUM
fumecheng-7594	385	8	,	,	PUNCT
fumecheng-7594	385	9	modellierung	modellierung	PROPN
fumecheng-7594	385	10	und	und	PROPN
fumecheng-7594	385	11	validierung	validierung	PROPN
fumecheng-7594	385	12	der	der	PROPN
fumecheng-7594	385	13	krafterzeugung	krafterzeugung	PROPN
fumecheng-7594	385	14	mit	mit	PROPN
fumecheng-7594	385	15	stick	stick	PROPN
fumecheng-7594	385	16	-	-	PUNCT
fumecheng-7594	385	17	slip	slip	NOUN
fumecheng-7594	385	18	-	-	PUNCT
fumecheng-7594	385	19	antrieben	antrieben	NOUN
fumecheng-7594	385	20	für	für	PROPN
fumecheng-7594	385	21	nanorobotische	nanorobotische	NOUN
fumecheng-7594	385	22	anwendungen	anwendungen	NOUN
fumecheng-7594	385	23	,	,	PUNCT
fumecheng-7594	385	24	phd	phd	NOUN
fumecheng-7594	385	25	thesis	thesis	NOUN
fumecheng-7594	385	26	,	,	PUNCT
fumecheng-7594	385	27	oldenburg	oldenburg	PROPN
fumecheng-7594	385	28	university	university	PROPN
fumecheng-7594	385	29	,	,	PUNCT
fumecheng-7594	385	30	germany	germany	PROPN
fumecheng-7594	385	31	,	,	PUNCT
fumecheng-7594	385	32	187	187	NUM
fumecheng-7594	385	33	p.	p.	NOUN
fumecheng-7594	385	34	17	17	NUM
fumecheng-7594	385	35	.	.	PUNCT
fumecheng-7594	386	1	popov	popov	PROPN
fumecheng-7594	386	2	,	,	PUNCT
fumecheng-7594	386	3	v.l	v.l	PROPN
fumecheng-7594	386	4	.	.	PROPN
fumecheng-7594	386	5	,	,	PUNCT
fumecheng-7594	386	6	2012	2012	NUM
fumecheng-7594	386	7	,	,	PUNCT
fumecheng-7594	386	8	basic	basic	ADJ
fumecheng-7594	386	9	ideas	idea	NOUN
fumecheng-7594	386	10	and	and	CCONJ
fumecheng-7594	386	11	applications	application	NOUN
fumecheng-7594	386	12	of	of	ADP
fumecheng-7594	386	13	the	the	DET
fumecheng-7594	386	14	method	method	NOUN
fumecheng-7594	386	15	of	of	ADP
fumecheng-7594	386	16	reduction	reduction	NOUN
fumecheng-7594	386	17	of	of	ADP
fumecheng-7594	386	18	dimensionality	dimensionality	NOUN
fumecheng-7594	386	19	in	in	ADP
fumecheng-7594	386	20	contact	contact	NOUN
fumecheng-7594	386	21	mechanics	mechanic	NOUN
fumecheng-7594	386	22	,	,	PUNCT
fumecheng-7594	386	23	physical	physical	ADJ
fumecheng-7594	386	24	mesomechanics	mesomechanic	NOUN
fumecheng-7594	386	25	,	,	PUNCT
fumecheng-7594	386	26	15	15	NUM
fumecheng-7594	386	27	,	,	PUNCT
fumecheng-7594	386	28	pp	pp	ADJ
fumecheng-7594	386	29	.	.	PUNCT
fumecheng-7594	387	1	254	254	NUM
fumecheng-7594	387	2	-	-	SYM
fumecheng-7594	387	3	263	263	NUM
fumecheng-7594	387	4	.	.	PUNCT
fumecheng-7594	388	1	18	18	NUM
fumecheng-7594	388	2	.	.	X
fumecheng-7594	389	1	teidelt	teidelt	PROPN
fumecheng-7594	389	2	,	,	PUNCT
fumecheng-7594	389	3	e.	e.	PROPN
fumecheng-7594	389	4	,	,	PUNCT
fumecheng-7594	389	5	willert	willert	PROPN
fumecheng-7594	389	6	,	,	PUNCT
fumecheng-7594	389	7	e.	e.	PROPN
fumecheng-7594	389	8	,	,	PUNCT
fumecheng-7594	389	9	filippov	filippov	PROPN
fumecheng-7594	389	10	,	,	PUNCT
fumecheng-7594	389	11	a.e	a.e	PROPN
fumecheng-7594	389	12	.	.	PROPN
fumecheng-7594	389	13	,	,	PUNCT
fumecheng-7594	389	14	popov	popov	PROPN
fumecheng-7594	389	15	,	,	PUNCT
fumecheng-7594	389	16	v.l	v.l	PROPN
fumecheng-7594	389	17	.	.	PROPN
fumecheng-7594	389	18	,	,	PUNCT
fumecheng-7594	389	19	2012	2012	NUM
fumecheng-7594	389	20	,	,	PUNCT
fumecheng-7594	389	21	modelling	modelling	NOUN
fumecheng-7594	389	22	of	of	ADP
fumecheng-7594	389	23	the	the	DET
fumecheng-7594	389	24	dynamic	dynamic	ADJ
fumecheng-7594	389	25	contact	contact	NOUN
fumecheng-7594	389	26	in	in	ADP
fumecheng-7594	389	27	stick	stick	NOUN
fumecheng-7594	389	28	-	-	PUNCT
fumecheng-7594	389	29	slip	slip	NOUN
fumecheng-7594	389	30	microdrives	microdrive	NOUN
fumecheng-7594	389	31	using	use	VERB
fumecheng-7594	389	32	the	the	DET
fumecheng-7594	389	33	method	method	NOUN
fumecheng-7594	389	34	of	of	ADP
fumecheng-7594	389	35	reduction	reduction	NOUN
fumecheng-7594	389	36	of	of	ADP
fumecheng-7594	389	37	dimensionality	dimensionality	NOUN
fumecheng-7594	389	38	,	,	PUNCT
fumecheng-7594	389	39	physical	physical	ADJ
fumecheng-7594	389	40	mesomechanics	mesomechanic	NOUN
fumecheng-7594	389	41	,	,	PUNCT
fumecheng-7594	389	42	15	15	NUM
fumecheng-7594	389	43	,	,	PUNCT
fumecheng-7594	389	44	pp	pp	ADJ
fumecheng-7594	389	45	.	.	PUNCT
fumecheng-7594	390	1	287	287	NUM
fumecheng-7594	390	2	-	-	SYM
fumecheng-7594	390	3	292	292	NUM
fumecheng-7594	390	4	.	.	PUNCT
fumecheng-7594	391	1	19	19	NUM
fumecheng-7594	391	2	.	.	PUNCT
fumecheng-7594	391	3	nguyen	nguyen	PROPN
fumecheng-7594	391	4	,	,	PUNCT
fumecheng-7594	391	5	h.x	h.x	PROPN
fumecheng-7594	391	6	.	.	PROPN
fumecheng-7594	391	7	,	,	PUNCT
fumecheng-7594	391	8	teidelt	teidelt	PROPN
fumecheng-7594	391	9	,	,	PUNCT
fumecheng-7594	391	10	e.	e.	PROPN
fumecheng-7594	391	11	,	,	PUNCT
fumecheng-7594	391	12	popov	popov	PROPN
fumecheng-7594	391	13	,	,	PUNCT
fumecheng-7594	391	14	v.l	v.l	PROPN
fumecheng-7594	391	15	.	.	PROPN
fumecheng-7594	391	16	,	,	PUNCT
fumecheng-7594	391	17	fatikow	fatikow	PROPN
fumecheng-7594	391	18	,	,	PUNCT
fumecheng-7594	391	19	s.	s.	PROPN
fumecheng-7594	391	20	,	,	PUNCT
fumecheng-7594	391	21	2014	2014	NUM
fumecheng-7594	391	22	,	,	PUNCT
fumecheng-7594	391	23	dynamic	dynamic	ADJ
fumecheng-7594	391	24	tangential	tangential	ADJ
fumecheng-7594	391	25	contact	contact	NOUN
fumecheng-7594	391	26	of	of	ADP
fumecheng-7594	391	27	rough	rough	ADJ
fumecheng-7594	391	28	surfaces	surface	NOUN
fumecheng-7594	391	29	in	in	ADP
fumecheng-7594	391	30	stick	stick	NOUN
fumecheng-7594	391	31	-	-	PUNCT
fumecheng-7594	391	32	slip	slip	NOUN
fumecheng-7594	391	33	microdrives	microdrive	NOUN
fumecheng-7594	391	34	:	:	PUNCT
fumecheng-7594	391	35	modelling	modelling	NOUN
fumecheng-7594	391	36	and	and	CCONJ
fumecheng-7594	391	37	validation	validation	NOUN
fumecheng-7594	391	38	using	use	VERB
fumecheng-7594	391	39	the	the	DET
fumecheng-7594	391	40	method	method	NOUN
fumecheng-7594	391	41	of	of	ADP
fumecheng-7594	391	42	dimensionality	dimensionality	NOUN
fumecheng-7594	391	43	reduction	reduction	NOUN
fumecheng-7594	391	44	,	,	PUNCT
fumecheng-7594	391	45	physical	physical	ADJ
fumecheng-7594	391	46	mesomechanics	mesomechanic	NOUN
fumecheng-7594	391	47	,	,	PUNCT
fumecheng-7594	391	48	17(4	17(4	NUM
fumecheng-7594	391	49	)	)	PUNCT
fumecheng-7594	391	50	,	,	PUNCT
fumecheng-7594	391	51	pp	pp	PROPN
fumecheng-7594	391	52	.	.	PUNCT
fumecheng-7594	392	1	304	304	NUM
fumecheng-7594	392	2	-	-	SYM
fumecheng-7594	392	3	310	310	NUM
fumecheng-7594	392	4	.	.	NOUN
fumecheng-7594	393	1	20	20	NUM
fumecheng-7594	393	2	.	.	PUNCT
fumecheng-7594	394	1	nguyen	nguyen	PROPN
fumecheng-7594	394	2	,	,	PUNCT
fumecheng-7594	394	3	x.h	x.h	PROPN
fumecheng-7594	394	4	.	.	PROPN
fumecheng-7594	394	5	,	,	PUNCT
fumecheng-7594	394	6	mau	mau	PROPN
fumecheng-7594	394	7	,	,	PUNCT
fumecheng-7594	394	8	t.h	t.h	PROPN
fumecheng-7594	394	9	.	.	PROPN
fumecheng-7594	394	10	,	,	PUNCT
fumecheng-7594	394	11	meyer	meyer	PROPN
fumecheng-7594	394	12	,	,	PUNCT
fumecheng-7594	394	13	i.	i.	PROPN
fumecheng-7594	394	14	,	,	PUNCT
fumecheng-7594	394	15	dang	dang	PROPN
fumecheng-7594	394	16	,	,	PUNCT
fumecheng-7594	394	17	b.l	b.l	PROPN
fumecheng-7594	394	18	.	.	PROPN
fumecheng-7594	394	19	,	,	PUNCT
fumecheng-7594	394	20	pham	pham	PROPN
fumecheng-7594	394	21	,	,	PUNCT
fumecheng-7594	394	22	h.p	h.p	PROPN
fumecheng-7594	394	23	.	.	PROPN
fumecheng-7594	394	24	,	,	PUNCT
fumecheng-7594	394	25	2018	2018	NUM
fumecheng-7594	394	26	,	,	PUNCT
fumecheng-7594	394	27	improvements	improvement	NOUN
fumecheng-7594	394	28	of	of	ADP
fumecheng-7594	394	29	piezo	piezo	NOUN
fumecheng-7594	394	30	-	-	ADJ
fumecheng-7594	394	31	actuated	actuate	VERB
fumecheng-7594	394	32	stickslip	stickslip	ADJ
fumecheng-7594	394	33	micro	micro	NOUN
fumecheng-7594	394	34	-	-	NOUN
fumecheng-7594	394	35	drives	drive	NOUN
fumecheng-7594	394	36	:	:	PUNCT
fumecheng-7594	394	37	modelling	modelling	NOUN
fumecheng-7594	394	38	and	and	CCONJ
fumecheng-7594	394	39	driving	driving	NOUN
fumecheng-7594	394	40	waveform	waveform	NOUN
fumecheng-7594	394	41	,	,	PUNCT
fumecheng-7594	394	42	coatings	coating	NOUN
fumecheng-7594	394	43	,	,	PUNCT
fumecheng-7594	394	44	8(2	8(2	NUM
fumecheng-7594	394	45	)	)	PUNCT
fumecheng-7594	394	46	,	,	PUNCT
fumecheng-7594	394	47	62	62	NUM
fumecheng-7594	394	48	.	.	PUNCT
fumecheng-7594	395	1	21	21	NUM
fumecheng-7594	395	2	.	.	PUNCT
fumecheng-7594	395	3	edeler	edeler	PROPN
fumecheng-7594	395	4	,	,	PUNCT
fumecheng-7594	395	5	c.	c.	PROPN
fumecheng-7594	395	6	,	,	PUNCT
fumecheng-7594	395	7	2010	2010	NUM
fumecheng-7594	395	8	,	,	PUNCT
fumecheng-7594	395	9	dynamic	dynamic	ADJ
fumecheng-7594	395	10	-	-	PUNCT
fumecheng-7594	395	11	mechanical	mechanical	ADJ
fumecheng-7594	395	12	analysis	analysis	NOUN
fumecheng-7594	395	13	of	of	ADP
fumecheng-7594	395	14	piezoactuators	piezoactuator	NOUN
fumecheng-7594	395	15	for	for	ADP
fumecheng-7594	395	16	mobile	mobile	ADJ
fumecheng-7594	395	17	nanorobots	nanorobot	NOUN
fumecheng-7594	395	18	,	,	PUNCT
fumecheng-7594	395	19	messe	messe	PROPN
fumecheng-7594	395	20	bremen	bremen	PROPN
fumecheng-7594	395	21	conference	conference	PROPN
fumecheng-7594	395	22	,	,	PUNCT
fumecheng-7594	395	23	germany	germany	PROPN
fumecheng-7594	395	24	.	.	PUNCT
fumecheng-7594	396	1	22	22	NUM
fumecheng-7594	396	2	.	.	PUNCT
fumecheng-7594	397	1	teidelt	teidelt	PROPN
fumecheng-7594	397	2	,	,	PUNCT
fumecheng-7594	397	3	e.	e.	PROPN
fumecheng-7594	397	4	,	,	PUNCT
fumecheng-7594	397	5	2014	2014	NUM
fumecheng-7594	397	6	,	,	PUNCT
fumecheng-7594	397	7	oscillating	oscillate	VERB
fumecheng-7594	397	8	contacts	contact	NOUN
fumecheng-7594	397	9	friction	friction	NOUN
fumecheng-7594	397	10	induced	induce	VERB
fumecheng-7594	397	11	motion	motion	NOUN
fumecheng-7594	397	12	and	and	CCONJ
fumecheng-7594	397	13	control	control	NOUN
fumecheng-7594	397	14	of	of	ADP
fumecheng-7594	397	15	friction	friction	NOUN
fumecheng-7594	397	16	,	,	PUNCT
fumecheng-7594	397	17	phd	phd	NOUN
fumecheng-7594	397	18	thesis	thesis	NOUN
fumecheng-7594	397	19	,	,	PUNCT
fumecheng-7594	397	20	technische	technische	PROPN
fumecheng-7594	397	21	universitat	universitat	PROPN
fumecheng-7594	397	22	berlin	berlin	PROPN
fumecheng-7594	397	23	,	,	PUNCT
fumecheng-7594	397	24	germany	germany	PROPN
fumecheng-7594	397	25	,	,	PUNCT
fumecheng-7594	397	26	131	131	NUM
fumecheng-7594	397	27	p.	p.	NOUN