id	keyword
fumecheng-13732	w w
fumecheng-13732	mems
fumecheng-13732	fractal
fumecheng-13732	pull
fumecheng-13732	m w
fumecheng-13732	− −
fumecheng-13732	systems
fumecheng-13732	principle
fumecheng-13732	fractional
fumecheng-13732	instability
fumecheng-13732	derivative