id	author	title	date	pages	extension	mime	words	sentence	flesch	summary	cache	txt
fis-1265	Zega, V.; Comi, C.; Corigliano, A.; Valzasina, C.	Integrated structure for a resonant micro-gyroscope and accelerometer	2014	9	.pdf	application/pdf	4213	148	46	Figure 2: Schematic views of the resonators: (a) in-plane view of bending resonator, (b) in-plane and side view of torsional resonator Their expressions can be obtained as in [13] making use of the Hamiltonian’s principle and searching for the solution, in terms of transverse displacement of the beam, in the form ( , ) ( ) ( )w y t y W t . The proposed device makes simultaneous use of two different operating principles typical of resonant MEMS: the frequency shift due to the presence of axial stresses in slender resonating beams and the frequency shift due to variations of the so-called electrical stiffness in torsional resonators.	cache/fis-1265.pdf	txt/fis-1265.txt