id	author	title	date	pages	extension	mime	words	sentence	flesch	summary	cache	txt
fis-2237	Gallo, Pasquale; Sumigawa, Takashi; Kitamura, Takayuki	Experimental characterization at nanoscale of single crystal silicon fracture toughness	2018	8	.pdf	application/pdf	5489	426	57	Ktn δf (nm) Pf (μN) Specimen 1 6.3 68 4.9 83.74 30.84 Specimen 2 20.2 59 2.9 115.59 65.11 Table 2: Geometry of the notches, deflection at failure δf and load at failure Pf. DISCUSSION: NANOCRACKING IN SILICON s is well-known, tensile strength and fracture toughness are fundamental mechanical properties. Measurement for fracture toughness of single crystal silicon film with tensile test, Sensors Actuators, A Phys., 119(1), pp.	cache/fis-2237.pdf	txt/fis-2237.txt
