id	sid	eid	entity	type
fis-168	1	1	microsoft	ORG
fis-168	1	2	numero 23	DATE
fis-168	2	1	pantano et alii	ORG
fis-168	2	2	frattura ed integrità strutturale	PERSON
fis-168	2	3	23	CARDINAL
fis-168	2	4	2013	DATE
fis-168	2	5	103	CARDINAL
fis-168	2	6	10.3221	CARDINAL
fis-168	2	7	103	CARDINAL
fis-168	2	8	2012	DATE
fis-168	2	9	italian	NORP
fis-168	2	10	maria f. pantano	PERSON
fis-168	2	11	university of calabria	ORG
fis-168	2	12	italy	GPE
fis-168	3	1	salvatore nigro	PERSON
fis-168	3	2	medical sciences	ORG
fis-168	3	3	university of magna graecia	ORG
fis-168	3	4	88100 germaneto	QUANTITY
fis-168	3	5	italy	GPE
fis-168	7	1	3d	CARDINAL
fis-168	11	1	sommario	PERSON
fis-168	12	1	molte applicazioni mems	ORG
fis-168	12	2	il sottile strato di fluido responsabile del fenomeno dello squeezefilm damping	ORG
fis-168	12	3	risulta essere	ORG
fis-168	12	4	rarefatto e	PERSON
fis-168	12	5	quindi	PERSON
fis-168	12	6	di navier-stokes	PERSON
fis-168	13	1	il modo più semplice	PERSON
fis-168	13	2	tener conto della	PERSON
fis-168	13	3	del fluido consiste nell’introduzione di una piccola modifica	ORG
fis-168	13	4	della sua formulazione ordinaria	ORG
fis-168	13	5	nella sostituzione della viscosità del fluido	PERSON
fis-168	14	1	nel presente lavoro	PERSON
fis-168	14	2	vengono presi	PERSON
fis-168	14	3	considerazione alcuni problemi di squeeze-film	ORG
fis-168	14	4	casi	ORG
fis-168	14	5	cui le piastre coinvolte sono dotate di moto	ORG
fis-168	14	6	normale traslatorio e casi	ORG
fis-168	14	7	sono dotate	PERSON
fis-168	14	8	invece	ORG
fis-168	14	9	di moto	PERSON
fis-168	15	1	tali	GPE
fis-168	15	2	numerica 3d	PERSON
fis-168	15	3	di navier-stokes	PERSON
fis-168	15	4	cui la viscosità	FAC
fis-168	15	5	viene calcolata mediante apposite	ORG
fis-168	16	1	inoltre	PERSON
fis-168	16	2	queste stesse	PERSON
fis-168	16	3	di modelli analitici già conosciuti	ORG
fis-168	16	4	di navier-stokes	PERSON
fis-168	17	1	tutti	GPE
fis-168	17	2	casi qui considerati	ORG
fis-168	17	3	numerici sono molto promettenti	PERSON
fis-168	17	4	quanto essi sono caratterizzati da uno	PERSON
fis-168	17	5	dai dati	ORG
fis-168	17	6	uguale o	PERSON
fis-168	17	7	quello	ORG
fis-168	17	8	dai corrispettivi risultati analitici	ORG
fis-168	17	9	anche	ORG
fis-168	18	1	quindi	PERSON
fis-168	18	2	nonostante quanto sia	PERSON
fis-168	18	3	letteratura	GPE
fis-168	18	4	il metodo della viscosità	PERSON
fis-168	18	5	adottato anche	FAC
fis-168	18	6	bassi	GPE
fis-168	18	7	di pressione	PERSON
fis-168	18	8	analisi numeriche agli elementi	ORG
fis-168	22	1	pantano et alii	ORG
fis-168	22	2	frattura ed integrità strutturale	PERSON
fis-168	22	3	23	CARDINAL
fis-168	22	4	2013	DATE
fis-168	22	5	103	CARDINAL
fis-168	22	6	10.3221	CARDINAL
fis-168	22	7	104	CARDINAL
fis-168	24	1	two	CARDINAL
fis-168	26	1	smaller than one third	CARDINAL
fis-168	26	2	1	CARDINAL
fis-168	27	1	the 1990s	DATE
fis-168	28	1	reynolds	ORG
fis-168	32	1	knudsen	ORG
fis-168	32	2	kn	PERSON
fis-168	33	1	1	CARDINAL
fis-168	33	2	2	CARDINAL
fis-168	33	3	2 2	CARDINAL
fis-168	33	4	2	CARDINAL
fis-168	34	1	kn	PERSON
fis-168	34	2	kn<0.01	NORP
fis-168	34	3	continuum	PERSON
fis-168	34	4	0.01	CARDINAL
fis-168	35	1	kn	ORG
fis-168	35	2	1	CARDINAL
fis-168	39	1	two	CARDINAL
fis-168	40	1	first	ORDINAL
fis-168	41	1	eff prq 	PERSON
fis-168	41	2	3	CARDINAL
fis-168	41	3	knudsen	PERSON
fis-168	42	1	the years	DATE
fis-168	42	2	μeff	ORG
fis-168	43	1	3	CARDINAL
fis-168	44	1	three	CARDINAL
fis-168	44	2	5	CARDINAL
fis-168	44	3	6	CARDINAL
fis-168	44	4	4	CARDINAL
fis-168	47	1	pantano et alii	ORG
fis-168	47	2	frattura ed integrità strutturale	PERSON
fis-168	47	3	23	CARDINAL
fis-168	47	4	2013	DATE
fis-168	47	5	103	CARDINAL
fis-168	47	6	10.3221	CARDINAL
fis-168	47	7	105	CARDINAL
fis-168	47	8	1995	DATE
fis-168	47	9	5	CARDINAL
fis-168	47	10	1.159 1 9.638ev	MONEY
fis-168	47	11		PERSON
fis-168	47	12	4	CARDINAL
fis-168	47	13	li	PERSON
fis-168	47	14	1999	DATE
fis-168	47	15	6	CARDINAL
fis-168	47	16	1 3	CARDINAL
fis-168	47	17	5	CARDINAL
fis-168	48	1	2 nd k	DATE
fis-168	49	1	pandey	PERSON
fis-168	49	2	pratap	PERSON
fis-168	49	3	2008	DATE
fis-168	49	4	li	PERSON
fis-168	50	1	1.4	CARDINAL
fis-168	50	2	4	CARDINAL
fis-168	50	3	1 3	CARDINAL
fis-168	50	4	1.4	CARDINAL
fis-168	50	5	6	CARDINAL
fis-168	50	6	1.4	CARDINAL
fis-168	51	1	6	CARDINAL
fis-168	54	1	second	ORDINAL
fis-168	54	2	md	GPE
fis-168	55	1	first	ORDINAL
fis-168	56	1	1966	DATE
fis-168	56	2	christian	NORP
fis-168	56	3	first	ORDINAL
fis-168	56	4	md	GPE
fis-168	57	1	8	CARDINAL
fis-168	58	1	3/2	CARDINAL
fis-168	58	2	  	PERSON
fis-168	59	1		GPE
fis-168	60	1	   	ORG
fis-168	60	2		ORG
fis-168	60	3	7	CARDINAL
fis-168	61	1	9	CARDINAL
fis-168	62	1	bao et al	PERSON
fis-168	63	1	10	CARDINAL
fis-168	63	2	3/2	CARDINAL
fis-168	63	3	1	CARDINAL
fis-168	63	4	2	CARDINAL
fis-168	65	1		GPE
fis-168	66	1		GPE
fis-168	68	1	christian	NORP
fis-168	68	2	bao et al	PERSON
fis-168	69	1	hutcherson	PERSON
fis-168	70	1	11	CARDINAL
fis-168	70	2	md	GPE
fis-168	71	1	md models	FAC
fis-168	72	1	li	PERSON
fis-168	72	2	12	CARDINAL
fis-168	72	3	hutcherson	PERSON
fis-168	73	1	md	GPE
fis-168	75	1	3	CARDINAL
fis-168	76	1	first	ORDINAL
fis-168	78	1	3	CARDINAL
fis-168	80	1	1	CARDINAL
fis-168	82	1	pantano et alii	ORG
fis-168	82	2	frattura ed integrità strutturale	PERSON
fis-168	82	3	23	CARDINAL
fis-168	82	4	2013	DATE
fis-168	82	5	103	CARDINAL
fis-168	82	6	10.3221	CARDINAL
fis-168	82	7	106	CARDINAL
fis-168	82	8	13	CARDINAL
fis-168	85	1	1	CARDINAL
fis-168	85	2	3 3	CARDINAL
fis-168	85	3		PRODUCT
fis-168	85	4	9	CARDINAL
fis-168	85	5	μ	ORG
fis-168	85	6	one	CARDINAL
fis-168	85	7	4	CARDINAL
fis-168	85	8	5	CARDINAL
fis-168	85	9	6	CARDINAL
fis-168	87	1	14	CARDINAL
fis-168	87	2	1,3	CARDINAL
fis-168	87	3	1,3	CARDINAL
fis-168	87	4	1 av	QUANTITY
fis-168	87	5	10	CARDINAL
fis-168	87	6	ω	ORDINAL
fis-168	87	7	gmn	ORG
fis-168	87	8	3 2 1.016	CARDINAL
fis-168	87	9	1 1.016	CARDINAL
fis-168	88	1		DATE
fis-168	88	2	11	CARDINAL
fis-168	88	3	3	CARDINAL
fis-168	88	4	768mn h mn	ORG
fis-168	88	5		DATE
fis-168	88	6		GPE
fis-168	88	7	12	CARDINAL
fis-168	89	1	64mn	CARDINAL
fis-168	90	1	13	CARDINAL
fis-168	90	2	j 	ORG
fis-168	91	1	9	CARDINAL
fis-168	93	1	15	CARDINAL
fis-168	93	2	5	CARDINAL
fis-168	93	3	0,2	ORG
fis-168	93	4	192 1	CARDINAL
fis-168	94	1		PERSON
fis-168	94	2	14	CARDINAL
fis-168	94	3	μ	GPE
fis-168	94	4	w	ORG
fis-168	94	5	η=w	ORG
fis-168	94	6	9	CARDINAL
fis-168	94	7	4	CARDINAL
fis-168	94	8	5	CARDINAL
fis-168	94	9	6	CARDINAL
fis-168	95	1	ince	PERSON
fis-168	97	1	pantano et alii	ORG
fis-168	97	2	frattura ed integrità strutturale	PERSON
fis-168	97	3	23	CARDINAL
fis-168	97	4	2013	DATE
fis-168	97	5	103	CARDINAL
fis-168	97	6	10.3221	CARDINAL
fis-168	97	7	107	CARDINAL
fis-168	101	1	3d	CARDINAL
fis-168	102	1	one	CARDINAL
fis-168	102	2	4	CARDINAL
fis-168	102	3	5	CARDINAL
fis-168	102	4	6	CARDINAL
fis-168	103	1	knudsen	PERSON
fis-168	104	1	knudsen	PERSON
fis-168	104	2	almost one	CARDINAL
fis-168	107	1	2	CARDINAL
fis-168	108	1	16	CARDINAL
fis-168	108	2	2 rt	MONEY
fis-168	108	3	15	CARDINAL
fis-168	108	4	286.9	CARDINAL
fis-168	110	1	2	CARDINAL
fis-168	110	2	15	CARDINAL
fis-168	110	3	knudsen	PERSON
fis-168	111	1	3d	CARDINAL
fis-168	114	1	1	CARDINAL
fis-168	115	1	1	CARDINAL
fis-168	115	2	fourth	ORDINAL
fis-168	116	1	about 5000 to 50000	CARDINAL
fis-168	117	1	16	CARDINAL
fis-168	117	2	860	CARDINAL
fis-168	117	3	2.80	CARDINAL
fis-168	118	1	one	CARDINAL
fis-168	118	2	15 to 60 minutes	TIME
fis-168	119	1	two	CARDINAL
fis-168	120	1	2	CARDINAL
fis-168	122	1	pantano et alii	ORG
fis-168	122	2	frattura ed integrità strutturale	PERSON
fis-168	122	3	23	CARDINAL
fis-168	122	4	2013	DATE
fis-168	122	5	103	CARDINAL
fis-168	122	6	10.3221	CARDINAL
fis-168	122	7	108	CARDINAL
fis-168	122	8	nn	PERSON
fis-168	122	9	16	CARDINAL
fis-168	122	10	p(x	PERSON
fis-168	123	1	2	CARDINAL
fis-168	124	1	second	ORDINAL
fis-168	124	2	2	CARDINAL
fis-168	124	3	17	CARDINAL
fis-168	124	4	17	CARDINAL
fis-168	125	1	3	CARDINAL
fis-168	127	1	3	CARDINAL
fis-168	128	1	three	CARDINAL
fis-168	128	2	18	CARDINAL
fis-168	128	3	4	CARDINAL
fis-168	128	4	5	CARDINAL
fis-168	128	5	6	CARDINAL
fis-168	130	1	4a	CARDINAL
fis-168	131	1	9	CARDINAL
fis-168	131	2	10	CARDINAL
fis-168	132	1	3	CARDINAL
fis-168	132	2	3	CARDINAL
fis-168	134	1	9	CARDINAL
fis-168	134	2	three	CARDINAL
fis-168	134	3	one	CARDINAL
fis-168	135	1	fig	ORG
fis-168	136	1	4b	CARDINAL
fis-168	137	1	3	CARDINAL
fis-168	138	1	3	CARDINAL
fis-168	140	1	pantano et alii	ORG
fis-168	140	2	frattura ed integrità strutturale	PERSON
fis-168	140	3	23	CARDINAL
fis-168	140	4	2013	DATE
fis-168	140	5	103	CARDINAL
fis-168	140	6	10.3221	CARDINAL
fis-168	140	7	109	CARDINAL
fis-168	140	8	4	CARDINAL
fis-168	140	9	3	CARDINAL
fis-168	141	1	103	CARDINAL
fis-168	142	1	23%	PERCENT
fis-168	143	1	9	CARDINAL
fis-168	143	2	58%	PERCENT
fis-168	145	1	9	CARDINAL
fis-168	147	1	0.13	CARDINAL
fis-168	148	1	3	CARDINAL
fis-168	149	1	fig	ORG
fis-168	150	1	4b	CARDINAL
fis-168	152	1	10	CARDINAL
fis-168	154	1	three square torsion micromirrors	QUANTITY
fis-168	155	1	minikes et al	PERSON
fis-168	156	1	17	CARDINAL
fis-168	156	2	pandey	PERSON
fis-168	156	3	pratap [4	PERSON
fis-168	157	1	1	CARDINAL
fis-168	157	2	1	CARDINAL
fis-168	158	1	17	CARDINAL
fis-168	158	2	500	CARDINAL
fis-168	158	3	13092.56	CARDINAL
fis-168	158	4	2	CARDINAL
fis-168	158	5	17	CARDINAL
fis-168	158	6	500	CARDINAL
fis-168	158	7	13 12824.87	CARDINAL
fis-168	158	8	3	CARDINAL
fis-168	158	9	4	CARDINAL
fis-168	158	10	400	CARDINAL
fis-168	158	11	529.2	CARDINAL
fis-168	158	12	1	CARDINAL
fis-168	158	13	minikes et al	PERSON
fis-168	159	1	17	CARDINAL
fis-168	159	2	pandey	PERSON
fis-168	159	3	pratap [4	PERSON
fis-168	160	1	minikes et al	PERSON
fis-168	161	1	2005	DATE
fis-168	163	1	18	CARDINAL
fis-168	164	1	5a	CARDINAL
fis-168	164	2	5b	CARDINAL
fis-168	166	1	pantano et alii	ORG
fis-168	166	2	frattura ed integrità strutturale	PERSON
fis-168	166	3	23	CARDINAL
fis-168	166	4	2013	DATE
fis-168	166	5	103	CARDINAL
fis-168	166	6	10.3221	CARDINAL
fis-168	166	7	110	CARDINAL
fis-168	166	8	5	CARDINAL
fis-168	166	9	1	CARDINAL
fis-168	166	10	2	CARDINAL
fis-168	166	11	minikes et al	PERSON
fis-168	167	1	17	CARDINAL
fis-168	168	1	20pa	ORDINAL
fis-168	171	1	3	CARDINAL
fis-168	172	1	linear	ORG
fis-168	173	1	0	CARDINAL
fis-168	173	2	6	CARDINAL
fis-168	174	1	15886	DATE
fis-168	174	2	5366	DATE
fis-168	174	3	two	CARDINAL
fis-168	175	1	6	CARDINAL
fis-168	175	2	1	CARDINAL
fis-168	175	3	2	CARDINAL
fis-168	175	4	minikes et al	PERSON
fis-168	176	1	17	CARDINAL
fis-168	179	1	14	CARDINAL
fis-168	179	2	4	CARDINAL
fis-168	179	3	5	CARDINAL
fis-168	179	4	6	CARDINAL
fis-168	179	5	three	CARDINAL
fis-168	180	1	three	CARDINAL
fis-168	181	1	4	CARDINAL
fis-168	181	2	1 1 1	CARDINAL
fis-168	182	1	18	CARDINAL
fis-168	183	1	pantano et alii	ORG
fis-168	183	2	frattura ed integrità strutturale	PERSON
fis-168	183	3	23	CARDINAL
fis-168	183	4	2013	DATE
fis-168	183	5	103	CARDINAL
fis-168	183	6	10.3221	CARDINAL
fis-168	183	7	111	CARDINAL
fis-168	183	8	qst	ORG
fis-168	184	1	fig	ORG
fis-168	185	1	7	CARDINAL
fis-168	185	2	20	CARDINAL
fis-168	185	3	two	CARDINAL
fis-168	185	4	minikes et al	PERSON
fis-168	186	1	17	CARDINAL
fis-168	187	1	8	CARDINAL
fis-168	188	1	7	CARDINAL
fis-168	188	2	1(a	CARDINAL
fis-168	188	3	2	CARDINAL
fis-168	188	4	minikes et al	PERSON
fis-168	189	1	17	CARDINAL
fis-168	192	1	24%	PERCENT
fis-168	192	2	27%	PERCENT
fis-168	194	1	pandey	PERSON
fis-168	194	2	pratap [4	PERSON
fis-168	197	1	three	CARDINAL
fis-168	198	1	9a	CARDINAL
fis-168	198	2	9b	CARDINAL
fis-168	199	1	8	CARDINAL
fis-168	199	2	1	CARDINAL
fis-168	199	3	2	CARDINAL
fis-168	199	4	minikes et al	PERSON
fis-168	200	1	17	CARDINAL
fis-168	202	1	pantano et alii	ORG
fis-168	202	2	frattura ed integrità strutturale	PERSON
fis-168	202	3	23	CARDINAL
fis-168	202	4	2013	DATE
fis-168	202	5	103	CARDINAL
fis-168	202	6	10.3221	CARDINAL
fis-168	202	7	112	CARDINAL
fis-168	202	8	9	CARDINAL
fis-168	202	9	pandey	PERSON
fis-168	202	10	pratap [4	PERSON
fis-168	203	1	18%	PERCENT
fis-168	204	1	14	CARDINAL
fis-168	206	1	four	CARDINAL
fis-168	209	1	three	CARDINAL
fis-168	210	1	four	CARDINAL
fis-168	210	2	four	CARDINAL
fis-168	210	3	four	CARDINAL
fis-168	216	1	1	CARDINAL
fis-168	216	2	m. bao	PERSON
fis-168	216	3	h. yang	PERSON
fis-168	216	4	136	CARDINAL
fis-168	216	5	2007	DATE
fis-168	216	6	3	CARDINAL
fis-168	217	1	2	CARDINAL
fis-168	217	2	l. a. rocha	PERSON
fis-168	217	3	e. cretu	PERSON
fis-168	217	4	r. f. woffenbuttel	PERSON
fis-168	217	5	j. micromech	PERSON
fis-168	218	1	microeng	GPE
fis-168	218	2	19	DATE
fis-168	218	3	2009) 074021	DATE
fis-168	219	1	3	CARDINAL
fis-168	219	2	h. sumali	PERSON
fis-168	219	3	j. micromech	PERSON
fis-168	220	1	microeng	GPE
fis-168	220	2	17	DATE
fis-168	220	3	2007	DATE
fis-168	220	4	2231	CARDINAL
fis-168	222	1	pantano et alii	ORG
fis-168	222	2	frattura ed integrità strutturale	PERSON
fis-168	222	3	23	CARDINAL
fis-168	222	4	2013	DATE
fis-168	222	5	103	CARDINAL
fis-168	222	6	10.3221	CARDINAL
fis-168	222	7	113	CARDINAL
fis-168	222	8	4	CARDINAL
fis-168	222	9	a. k. pandey	PERSON
fis-168	222	10	r. pratap	PERSON
fis-168	222	11	j. micromech	PERSON
fis-168	223	1	microeng	GPE
fis-168	223	2	18 (2008) 105003	DATE
fis-168	224	1	5	CARDINAL
fis-168	224	2	h. kuisma	PERSON
fis-168	224	3	j. lahdenpera	GPE
fis-168	224	4	t. ryhanen	PERSON
fis-168	224	5	48	DATE
fis-168	224	6	1995	DATE
fis-168	224	7	239	CARDINAL
fis-168	225	1	6	CARDINAL
fis-168	225	2	w. l. li	PERSON
fis-168	225	3	10	CARDINAL
fis-168	225	4	1999	DATE
fis-168	225	5	440	CARDINAL
fis-168	226	1	7	CARDINAL
fis-168	226	2	c. w. leung	PERSON
fis-168	226	3	t. thurber	PERSON
fis-168	226	4	w. ye	PERSON
fis-168	227	1	nanofluid	ORG
fis-168	227	2	2011	DATE
fis-168	227	3	10.1007/s10404-011	CARDINAL
fis-168	228	1	8	CARDINAL
fis-168	228	2	16	CARDINAL
fis-168	228	3	1966	DATE
fis-168	228	4	175	CARDINAL
fis-168	229	1	9	CARDINAL
fis-168	229	2	j. d. zook	PERSON
fis-168	229	3	d. w	PERSON
fis-168	229	4	35	CARDINAL
fis-168	229	5	1992	DATE
fis-168	229	6	51	DATE
fis-168	230	1	10	CARDINAL
fis-168	230	2	m. bao	PERSON
fis-168	230	3	h. yang	PERSON
fis-168	230	4	h. yin	PERSON
fis-168	230	5	j. micromech	PERSON
fis-168	231	1	microeng	GPE
fis-168	231	2	12	CARDINAL
fis-168	231	3	2002	DATE
fis-168	231	4	341	CARDINAL
fis-168	232	1	11	CARDINAL
fis-168	232	2	s. hutcherson	PERSON
fis-168	232	3	w. ye	PERSON
fis-168	232	4	j. micromech	PERSON
fis-168	233	1	microeng	GPE
fis-168	233	2	14 (2004	DATE
fis-168	234	1	12	CARDINAL
fis-168	234	2	p. li	PERSON
fis-168	234	3	j. micromech	PERSON
fis-168	235	1	microeng	GPE
fis-168	235	2	20 (2010) 035005	DATE
fis-168	236	1	13	CARDINAL
fis-168	236	2	s. nigro	PERSON
fis-168	236	3	l. pagnotta	PERSON
fis-168	236	4	m. f. pantano	PERSON
fis-168	236	5	microfluid	ORG
fis-168	237	1	nanofluid	ORG
fis-168	237	2	12	CARDINAL
fis-168	237	3	6	CARDINAL
fis-168	237	4	2012	DATE
fis-168	237	5	971	CARDINAL
fis-168	238	1	14	CARDINAL
fis-168	238	2	a. pursula	PERSON
fis-168	238	3	p. raback	PERSON
fis-168	238	4	j. micromech	PERSON
fis-168	239	1	microeng	GPE
fis-168	239	2	15 (2005	DATE
fis-168	239	3	1624	CARDINAL
fis-168	240	1	15	CARDINAL
fis-168	240	2	f. pan	PERSON
fis-168	240	3	j. kubby	PERSON
fis-168	240	4	e. peeters	PERSON
fis-168	240	5	a. t. tran	PERSON
fis-168	240	6	s. mukherjee	PERSON
fis-168	240	7	j. micromech	PERSON
fis-168	241	1	microeng	GPE
fis-168	241	2	8	CARDINAL
fis-168	241	3	1998	DATE
fis-168	241	4	200	CARDINAL
fis-168	242	1	16	CARDINAL
fis-168	242	2	j. w. lee	PERSON
fis-168	242	3	r. tung	PERSON
fis-168	242	4	a. raman	PERSON
fis-168	242	5	h. sumali	PERSON
fis-168	242	6	j. p. sullivan	PERSON
fis-168	242	7	j. micromech	PERSON
fis-168	243	1	microeng	GPE
fis-168	243	2	19	DATE
fis-168	243	3	2009	DATE
fis-168	243	4	105	CARDINAL
fis-168	244	1	17	CARDINAL
fis-168	244	2	a. minikes	PERSON
fis-168	244	3	i. bucher	PERSON
fis-168	244	4	g. avivi	PERSON
fis-168	244	5	j. micromech	PERSON
fis-168	245	1	microeng	GPE
fis-168	245	2	15 (2005) 1762	DATE
fis-168	246	1	18	CARDINAL
fis-168	246	2	s. nigro	PERSON
fis-168	246	3	l. pagnotta	PERSON
fis-168	246	4	m. f. pantano	PERSON
fis-168	246	5	11th	ORDINAL
fis-168	246	6	rovaniemi	GPE
fis-168	246	7	finland	GPE
fis-168	246	8	april 18-20	DATE
fis-168	246	9	2012	DATE
fis-168	246	10	37	DATE
fis-168	247	1	19	CARDINAL
fis-168	247	2	j. micromech	PERSON
fis-168	248	1	microeng	GPE
fis-168	248	2	14 (2004) 1109	DATE
fis-168	249	1	20	CARDINAL
fis-168	249	2	s. nigro	PERSON
fis-168	249	3	l. pagnotta	PERSON
fis-168	249	4	m. f. pantano	PERSON
fis-168	249	5	2012	DATE
fis-168	249	6	nsti-nanotech	ORG
fis-168	249	7	2012	DATE
fis-168	249	8	333	CARDINAL