id	sid	tid	token	lemma	pos
fis-105	1	1	microsoft	microsoft	PROPN
fis-105	1	2	word	word	PROPN
fis-105	1	3	numero	numero	PROPN
fis-105	1	4	15	15	NUM
fis-105	1	5	articolo	articolo	PROPN
fis-105	1	6	3	3	NUM
fis-105	1	7	c	c	PROPN
fis-105	1	8	di	di	X
fis-105	1	9	kl	kl	PROPN
fis-105	1	10	ch	ch	PROPN
fis-105	1	11	kla	kla	PROPN
fis-105	1	12	de	de	X
fis-105	1	13	fra	fra	PROPN
fis-105	1	14	ab	ab	PROPN
fis-105	1	15	cer	cer	PROPN
fis-105	1	16	dir	dir	PROPN
fis-105	1	17	add	add	VERB
fis-105	1	18	itse	itse	ADJ
fis-105	1	19	hig	hig	PROPN
fis-105	1	20	th	th	X
fis-105	1	21	mi	mi	X
fis-105	1	22	nu	nu	INTJ
fis-105	1	23	th	th	X
fis-105	1	24	str	str	NOUN
fis-105	1	25	int	int	PROPN
fis-105	1	26	cra	cra	PROPN
fis-105	1	27	len	len	PROPN
fis-105	1	28	th	th	X
fis-105	1	29	est	est	X
fis-105	1	30	tre	tre	PROPN
fis-105	1	31	ke	ke	PROPN
fis-105	1	32	in	in	ADP
fis-105	1	33	m	m	NOUN
fis-105	1	34	rack	rack	NOUN
fis-105	1	35	pro	pro	ADJ
fis-105	1	36	irect	irect	PROPN
fis-105	1	37	bo	bo	PROPN
fis-105	1	38	laus	laus	PROPN
fis-105	1	39	vogel	vogel	PROPN
fis-105	1	40	hemnitz	hemnitz	PROPN
fis-105	1	41	unive	unive	ADJ
fis-105	1	42	aus.vogel@s20	aus.vogel@s20	PROPN
fis-105	1	43	etlef	etlef	NOUN
fis-105	1	44	billep	billep	NOUN
fis-105	1	45	aunhofer	aunhofer	VERB
fis-105	1	46	resea	resea	ADJ
fis-105	1	47	bstract	bstract	NOUN
fis-105	1	48	.	.	PUNCT
fis-105	2	1	w	w	NOUN
fis-105	2	2	rtain	rtain	NOUN
fis-105	2	3	interme	interme	PROPN
fis-105	2	4	rect	rect	PROPN
fis-105	2	5	bonding	bonding	NOUN
fis-105	2	6	dition	dition	NOUN
fis-105	2	7	to	to	ADP
fis-105	2	8	the	the	DET
fis-105	2	9	elf	elf	NOUN
fis-105	2	10	.	.	PUNCT
fis-105	3	1	it	it	PRON
fis-105	3	2	can	can	AUX
fis-105	3	3	va	va	PROPN
fis-105	3	4	gher	gher	NOUN
fis-105	3	5	toughne	toughne	NOUN
fis-105	3	6	he	he	PRON
fis-105	3	7	fracture	fracture	VERB
fis-105	3	8	to	to	ADP
fis-105	3	9	cro	cro	NOUN
fis-105	3	10	-	-	ADJ
fis-105	3	11	chevron	chevron	ADJ
fis-105	3	12	merical	merical	ADJ
fis-105	3	13	anal	anal	NOUN
fis-105	4	1	he	he	PRON
fis-105	4	2	maximum	maximum	ADJ
fis-105	4	3	ess	ess	PROPN
fis-105	4	4	intensity	intensity	NOUN
fis-105	4	5	tensity	tensity	NOUN
fis-105	4	6	coeffi	coeffi	VERB
fis-105	4	7	ack	ack	NOUN
fis-105	4	8	.	.	PUNCT
fis-105	5	1	the	the	DET
fis-105	5	2	str	str	NOUN
fis-105	5	3	ngth	ngth	NOUN
fis-105	5	4	itself	itself	PRON
fis-105	5	5	.	.	PUNCT
fis-105	6	1	he	he	PRON
fis-105	6	2	paper	paper	NOUN
fis-105	6	3	is	be	AUX
fis-105	6	4	timation	timation	NOUN
fis-105	6	5	of	of	ADP
fis-105	6	6	d	d	NOUN
fis-105	6	7	eatments	eatment	NOUN
fis-105	6	8	and	and	CCONJ
fis-105	6	9	eywords	eyword	NOUN
fis-105	6	10	.	.	PUNCT
fis-105	7	1	c	c	PROPN
fis-105	7	2	ntroductio	ntroductio	PROPN
fis-105	7	3	icro	icro	PROPN
fis-105	7	4	e	e	PROPN
fis-105	7	5	comp	comp	NOUN
fis-105	7	6	millimm	millimm	NOUN
fis-105	7	7	opagati	opagati	PROPN
fis-105	7	8	onded	onde	VERB
fis-105	7	9	si	si	PROPN
fis-105	7	10	,	,	PUNCT
fis-105	7	11	dirk	dirk	PROPN
fis-105	7	12	wu	wu	PROPN
fis-105	7	13	ersity	ersity	NOUN
fis-105	7	14	of	of	ADP
fis-105	7	15	techno	techno	NOUN
fis-105	7	16	005.tu	005.tu	NOUN
fis-105	7	17	-	-	PUNCT
fis-105	7	18	chemni	chemni	NOUN
fis-105	7	19	p	p	NOUN
fis-105	7	20	,	,	PUNCT
fis-105	7	21	maik	maik	PROPN
fis-105	7	22	wi	wi	PROPN
fis-105	7	23	arch	arch	PROPN
fis-105	7	24	institutio	institutio	NOUN
fis-105	7	25	wafer	wafer	NOUN
fis-105	7	26	bondin	bondin	VERB
fis-105	7	27	ediate	ediate	ADJ
fis-105	7	28	layers	layer	NOUN
fis-105	7	29	g	g	PROPN
fis-105	7	30	technology	technology	NOUN
fis-105	7	31	e	e	NOUN
fis-105	7	32	wafer	wafer	VERB
fis-105	7	33	mat	mat	NOUN
fis-105	7	34	ary	ary	PROPN
fis-105	7	35	for	for	SCONJ
fis-105	7	36	differ	differ	VERB
fis-105	7	37	ess	ess	PROPN
fis-105	7	38	of	of	ADP
fis-105	7	39	the	the	DET
fis-105	7	40	bo	bo	PROPN
fis-105	7	41	oughness	oughness	NOUN
fis-105	7	42	is	be	AUX
fis-105	7	43	n	n	PRON
fis-105	7	44	-	-	PUNCT
fis-105	7	45	specimen	speciman	NOUN
fis-105	7	46	,	,	PUNCT
fis-105	7	47	lysis	lysis	NOUN
fis-105	7	48	with	with	ADP
fis-105	7	49	exp	exp	NOUN
fis-105	7	50	m	m	PROPN
fis-105	7	51	force	force	NOUN
fis-105	7	52	is	be	AUX
fis-105	7	53	m	m	PROPN
fis-105	7	54	y	y	PROPN
fis-105	7	55	coefficient	coefficient	NOUN
fis-105	7	56	ficient	ficient	NOUN
fis-105	7	57	is	be	AUX
fis-105	7	58	the	the	DET
fis-105	7	59	ress	ress	NOUN
fis-105	7	60	intensity	intensity	NOUN
fis-105	7	61	focused	focus	VERB
fis-105	7	62	on	on	ADP
fis-105	7	63	dimensionle	dimensionle	NOUN
fis-105	7	64	d	d	NOUN
fis-105	7	65	annealing	anneal	VERB
fis-105	7	66	t	t	PROPN
fis-105	7	67	compliance	compliance	NOUN
fis-105	7	68	m	m	VERB
fis-105	7	69	on	on	ADP
fis-105	7	70	electro	electro	ADJ
fis-105	7	71	mech	mech	NOUN
fis-105	7	72	plex	plex	NOUN
fis-105	7	73	by	by	ADP
fis-105	7	74	using	use	VERB
fis-105	7	75	metre	metre	NOUN
fis-105	7	76	range	range	NOUN
fis-105	7	77	(	(	PUNCT
fis-105	7	78	ion	ion	NOUN
fis-105	7	79	in	in	ADP
fis-105	7	80	m	m	PROPN
fis-105	7	81	ilicon	ilicon	NOUN
fis-105	7	82	-	-	PUNCT
fis-105	7	83	si	si	NOUN
fis-105	7	84	ensch	ensch	X
fis-105	7	85	,	,	PUNCT
fis-105	7	86	ale	ale	NOUN
fis-105	7	87	ology	ology	NOUN
fis-105	7	88	,	,	PUNCT
fis-105	7	89	09107	09107	NUM
fis-105	7	90	itz.de	itz.de	NUM
fis-105	7	91	,	,	PUNCT
fis-105	7	92	dirk.wu	dirk.wu	PROPN
fis-105	7	93	iemer	iemer	NOUN
fis-105	7	94	on	on	ADP
fis-105	7	95	for	for	ADP
fis-105	7	96	electron	electron	NOUN
fis-105	7	97	ng	ng	PROPN
fis-105	7	98	describe	describe	VERB
fis-105	7	99	.	.	PUNCT
fis-105	8	1	current	current	ADJ
fis-105	8	2	inv	inv	ADJ
fis-105	8	3	y.	y.	NOUN
fis-105	8	4	it	it	PRON
fis-105	8	5	is	be	AUX
fis-105	8	6	carrie	carrie	NOUN
fis-105	8	7	terials	terial	NOUN
fis-105	8	8	,	,	PUNCT
fis-105	8	9	the	the	DET
fis-105	8	10	t	t	PROPN
fis-105	8	11	rent	rent	NOUN
fis-105	8	12	pre	pre	ADJ
fis-105	8	13	-	-	ADJ
fis-105	8	14	trea	trea	ADJ
fis-105	8	15	onded	onde	VERB
fis-105	8	16	interf	interf	NOUN
fis-105	8	17	a	a	DET
fis-105	8	18	suitable	suitable	ADJ
fis-105	8	19	va	va	NOUN
fis-105	8	20	the	the	DET
fis-105	8	21	fractur	fractur	PROPN
fis-105	8	22	perimental	perimental	NOUN
fis-105	8	23	m	m	PROPN
fis-105	8	24	measured	measure	VERB
fis-105	8	25	dur	dur	PROPN
fis-105	8	26	t	t	PROPN
fis-105	8	27	can	can	AUX
fis-105	8	28	be	be	AUX
fis-105	8	29	det	det	NOUN
fis-105	8	30	compliance	compliance	NOUN
fis-105	9	1	y	y	PROPN
fis-105	9	2	coefficien	coefficien	VERB
fis-105	9	3	the	the	DET
fis-105	9	4	micross	micross	NOUN
fis-105	9	5	stress	stress	NOUN
fis-105	9	6	inte	inte	NOUN
fis-105	9	7	temperatures	temperature	NOUN
fis-105	9	8	method	method	VERB
fis-105	9	9	;	;	PUNCT
fis-105	9	10	fe	fe	X
fis-105	9	11	hanical	hanical	ADJ
fis-105	9	12	system	system	NOUN
fis-105	9	13	g	g	PROPN
fis-105	9	14	different	different	ADJ
fis-105	9	15	m	m	NOUN
fis-105	9	16	(	(	PUNCT
fis-105	9	17	smaller	small	ADJ
fis-105	9	18	than	than	ADP
fis-105	9	19	k.	k.	PROPN
fis-105	9	20	vogel	vogel	PROPN
fis-105	9	21	et	et	PROPN
fis-105	9	22	micro	micro	PROPN
fis-105	9	23	-	-	PROPN
fis-105	9	24	ch	ch	PROPN
fis-105	9	25	ilicon	ilicon	PROPN
fis-105	9	26	w	w	PROPN
fis-105	9	27	exey	exey	PROPN
fis-105	9	28	shapo	shapo	PROPN
fis-105	9	29	chemnitz	chemnitz	PROPN
fis-105	9	30	uensch@zfm.tu	uensch@zfm.tu	PROPN
fis-105	9	31	nic	nic	PROPN
fis-105	9	32	nano	nano	PROPN
fis-105	9	33	syste	syste	PROPN
fis-105	9	34	s	s	PRON
fis-105	9	35	all	all	DET
fis-105	9	36	techno	techno	NOUN
fis-105	9	37	vestigations	vestigation	NOUN
fis-105	9	38	ed	ed	NOUN
fis-105	9	39	out	out	ADP
fis-105	9	40	witho	witho	ADJ
fis-105	9	41	toughness	toughness	NOUN
fis-105	9	42	o	o	NOUN
fis-105	9	43	atments	atment	NOUN
fis-105	9	44	.	.	PUNCT
fis-105	10	1	fur	fur	NOUN
fis-105	10	2	face	face	NOUN
fis-105	10	3	.	.	PUNCT
fis-105	11	1	alue	alue	PROPN
fis-105	11	2	to	to	ADP
fis-105	11	3	descr	descr	PROPN
fis-105	11	4	re	re	ADP
fis-105	11	5	toughnes	toughnes	PROPN
fis-105	11	6	measuremen	measureman	NOUN
fis-105	11	7	ring	ring	VERB
fis-105	11	8	a	a	DET
fis-105	11	9	micro	micro	NOUN
fis-105	11	10	termined	termine	VERB
fis-105	11	11	by	by	ADP
fis-105	11	12	method	method	NOUN
fis-105	11	13	.	.	PUNCT
fis-105	12	1	th	th	X
fis-105	12	2	t	t	PROPN
fis-105	12	3	can	can	AUX
fis-105	12	4	be	be	AUX
fis-105	12	5	dir	dir	NOUN
fis-105	12	6	-chevron	-chevron	NUM
fis-105	12	7	-	-	PUNCT
fis-105	12	8	tes	tes	NOUN
fis-105	12	9	ensity	ensity	NOUN
fis-105	12	10	coeffi	coeffi	VERB
fis-105	12	11	s	s	PROPN
fis-105	12	12	on	on	ADP
fis-105	12	13	the	the	DET
fis-105	12	14	mea	mea	NOUN
fis-105	12	15	e	e	NOUN
fis-105	12	16	-	-	NOUN
fis-105	12	17	analysis	analysis	NOUN
fis-105	12	18	;	;	PUNCT
fis-105	12	19	fr	fr	PROPN
fis-105	12	20	ms	ms	PROPN
fis-105	12	21	(	(	PUNCT
fis-105	12	22	mems	mems	PROPN
fis-105	12	23	)	)	PUNCT
fis-105	12	24	a	a	DET
fis-105	12	25	aterials	aterial	NOUN
fis-105	12	26	in	in	ADP
fis-105	12	27	on	on	ADP
fis-105	12	28	100	100	NUM
fis-105	12	29	µm	µm	NOUN
fis-105	12	30	)	)	PUNCT
fis-105	12	31	wh	wh	PROPN
fis-105	12	32	alii	alii	PROPN
fis-105	12	33	,	,	PUNCT
fis-105	12	34	frattura	frattura	PROPN
fis-105	12	35	ed	ed	PROPN
fis-105	12	36	hevron	hevron	PROPN
fis-105	12	37	-	-	PUNCT
fis-105	12	38	t	t	PROPN
fis-105	12	39	wafers	wafer	NOUN
fis-105	12	40	orin	orin	PROPN
fis-105	12	41	,	,	PUNCT
fis-105	12	42	jan	jan	PROPN
fis-105	12	43	m	m	NUM
fis-105	12	44	tu-chemnitz.de	tu-chemnitz.de	VERB
fis-105	12	45	ems	ems	PROPN
fis-105	12	46	enas	ena	NOUN
fis-105	12	47	,	,	PUNCT
fis-105	12	48	ologies	ology	NOUN
fis-105	12	49	for	for	ADP
fis-105	12	50	j	j	PROPN
fis-105	12	51	are	be	AUX
fis-105	12	52	focused	focus	VERB
fis-105	12	53	out	out	ADP
fis-105	12	54	intermed	interme	VERB
fis-105	12	55	f	f	PROPN
fis-105	12	56	the	the	DET
fis-105	12	57	bonde	bonde	PROPN
fis-105	12	58	rthermore	rthermore	PROPN
fis-105	12	59	,	,	PUNCT
fis-105	12	60	a	a	DET
fis-105	12	61	ribe	ribe	NOUN
fis-105	12	62	the	the	DET
fis-105	12	63	dam	dam	NOUN
fis-105	12	64	ss	ss	PROPN
fis-105	12	65	can	can	AUX
fis-105	12	66	be	be	AUX
fis-105	12	67	d	d	X
fis-105	12	68	nt	not	PART
fis-105	12	69	of	of	ADP
fis-105	12	70	the	the	DET
fis-105	12	71	max	max	PROPN
fis-105	12	72	o	o	PROPN
fis-105	12	73	-	-	NOUN
fis-105	12	74	chevron	chevron	NOUN
fis-105	12	75	-	-	PUNCT
fis-105	12	76	te	te	NOUN
fis-105	12	77	y	y	PROPN
fis-105	12	78	a	a	DET
fis-105	12	79	fe	fe	NOUN
fis-105	12	80	-	-	NOUN
fis-105	12	81	simu	simu	NOUN
fis-105	12	82	he	he	PRON
fis-105	12	83	complian	complian	VERB
fis-105	12	84	rectly	rectly	ADV
fis-105	12	85	derive	derive	VERB
fis-105	12	86	st	st	PROPN
fis-105	12	87	for	for	ADP
fis-105	12	88	direct	direct	ADJ
fis-105	12	89	icient	icient	NOUN
fis-105	12	90	as	as	ADP
fis-105	12	91	a	a	DET
fis-105	12	92	fu	fu	ADJ
fis-105	12	93	asured	asure	VERB
fis-105	12	94	maxi	maxi	ADJ
fis-105	12	95	racture	racture	NOUN
fis-105	12	96	tough	tough	ADJ
fis-105	12	97	are	be	AUX
fis-105	12	98	applied	apply	VERB
fis-105	12	99	in	in	ADP
fis-105	12	100	ne	ne	PROPN
fis-105	12	101	system	system	NOUN
fis-105	12	102	.	.	PUNCT
fis-105	13	1	me	i	PRON
fis-105	13	2	hich	hich	PROPN
fis-105	13	3	determin	determin	PROPN
fis-105	13	4	d	d	PROPN
fis-105	13	5	integrità	integrità	PROPN
fis-105	13	6	struttu	struttu	PROPN
fis-105	13	7	test	test	NOUN
fis-105	13	8	sam	sam	PROPN
fis-105	13	9	mehner	mehner	PROPN
fis-105	13	10	technologie	technologie	PROPN
fis-105	13	11	-	-	PUNCT
fis-105	13	12	c	c	NOUN
fis-105	13	13	joining	join	VERB
fis-105	13	14	two	two	NUM
fis-105	13	15	d	d	NOUN
fis-105	13	16	on	on	ADP
fis-105	13	17	so	so	ADV
fis-105	13	18	-	-	PUNCT
fis-105	13	19	calle	calle	NOUN
fis-105	13	20	diate	diate	PROPN
fis-105	13	21	layers	layers	PROPN
fis-105	13	22	ed	ed	PROPN
fis-105	13	23	interface	interface	VERB
fis-105	13	24	an	an	DET
fis-105	13	25	increase	increase	NOUN
fis-105	13	26	o	o	NOUN
fis-105	13	27	mage	mage	NOUN
fis-105	13	28	behavio	behavio	NOUN
fis-105	13	29	determined	determine	VERB
fis-105	13	30	ximum	ximum	ADJ
fis-105	13	31	force	force	NOUN
fis-105	13	32	est	est	X
fis-105	13	33	using	use	VERB
fis-105	13	34	a	a	DET
fis-105	13	35	m	m	NOUN
fis-105	13	36	ulation	ulation	NOUN
fis-105	13	37	only	only	ADV
fis-105	13	38	.	.	PUNCT
fis-105	14	1	ce	ce	PROPN
fis-105	14	2	of	of	ADP
fis-105	14	3	the	the	DET
fis-105	14	4	wh	wh	NOUN
fis-105	14	5	ed	ed	NOUN
fis-105	14	6	from	from	ADP
fis-105	14	7	the	the	DET
fis-105	14	8	t	t	NOUN
fis-105	14	9	bonded	bond	VERB
fis-105	14	10	sil	sil	PROPN
fis-105	14	11	unction	unction	NOUN
fis-105	14	12	of	of	ADP
fis-105	14	13	ge	ge	PROPN
fis-105	14	14	imum	imum	PROPN
fis-105	14	15	force	force	PROPN
fis-105	14	16	hness	hness	NOUN
fis-105	14	17	;	;	PUNCT
fis-105	14	18	micro	micro	NOUN
fis-105	14	19	n	n	CCONJ
fis-105	14	20	a	a	DET
fis-105	14	21	wide	wide	ADJ
fis-105	14	22	indus	indus	NOUN
fis-105	14	23	ems	ems	PROPN
fis-105	14	24	have	have	VERB
fis-105	14	25	at	at	ADP
fis-105	14	26	nes	ne	NOUN
fis-105	14	27	its	its	PRON
fis-105	14	28	functio	functio	PROPN
fis-105	14	29	turale	turale	NOUN
fis-105	14	30	,	,	PUNCT
fis-105	14	31	15	15	NUM
fis-105	14	32	(	(	PUNCT
fis-105	14	33	2011	2011	NUM
fis-105	14	34	)	)	PUNCT
fis-105	14	35	mples	mple	NOUN
fis-105	14	36	of	of	ADP
fis-105	14	37	campus	campus	NOUN
fis-105	14	38	3	3	NUM
fis-105	14	39	,	,	PUNCT
fis-105	14	40	091	091	NUM
fis-105	14	41	or	or	CCONJ
fis-105	14	42	more	more	ADJ
fis-105	14	43	s	s	NOUN
fis-105	14	44	d	d	X
fis-105	14	45	low	low	ADJ
fis-105	14	46	tempe	tempe	NOUN
fis-105	14	47	and	and	CCONJ
fis-105	14	48	at	at	ADP
fis-105	14	49	temp	temp	NOUN
fis-105	14	50	also	also	ADV
fis-105	14	51	depend	depend	VERB
fis-105	14	52	of	of	ADP
fis-105	14	53	the	the	DET
fis-105	14	54	annea	annea	NOUN
fis-105	14	55	our	our	PRON
fis-105	14	56	of	of	ADP
fis-105	14	57	the	the	DET
fis-105	14	58	bo	bo	PROPN
fis-105	14	59	either	either	CCONJ
fis-105	14	60	num	num	PROPN
fis-105	14	61	e.	e.	PROPN
fis-105	14	62	mode	mode	PROPN
fis-105	15	1	i	i	PRON
fis-105	15	2	load	load	VERB
fis-105	15	3	one	one	NUM
fis-105	15	4	possib	possib	ADJ
fis-105	15	5	hole	hole	NOUN
fis-105	15	6	specime	specime	NOUN
fis-105	15	7	e	e	PROPN
fis-105	15	8	simulated	simulate	VERB
fis-105	15	9	licon	licon	ADJ
fis-105	15	10	-	-	PUNCT
fis-105	15	11	silicon	silicon	NOUN
fis-105	15	12	eometry	eometry	NOUN
fis-105	15	13	,	,	PUNCT
fis-105	15	14	the	the	PRON
fis-105	15	15	are	be	AUX
fis-105	15	16	analysed	analyse	VERB
fis-105	15	17	o	o	ADJ
fis-105	15	18	-	-	NOUN
fis-105	15	19	chevron	chevron	ADJ
fis-105	15	20	-	-	PUNCT
fis-105	15	21	te	te	ADV
fis-105	15	22	strial	strial	ADJ
fis-105	15	23	range	range	NOUN
fis-105	15	24	.	.	PUNCT
fis-105	16	1	t	t	PROPN
fis-105	16	2	t	t	PROPN
fis-105	16	3	least	least	ADV
fis-105	16	4	one	one	NUM
fis-105	16	5	ty	ty	INTJ
fis-105	16	6	on	on	ADP
fis-105	16	7	[	[	X
fis-105	16	8	1	1	NUM
fis-105	16	9	]	]	PUNCT
fis-105	16	10	.	.	PUNCT
fis-105	17	1	they	they	PRON
fis-105	17	2	)	)	PUNCT
fis-105	17	3	21	21	NUM
fis-105	17	4	-	-	SYM
fis-105	17	5	28	28	NUM
fis-105	17	6	;	;	PUNCT
fis-105	17	7	doi	doi	NOUN
fis-105	17	8	:	:	PUNCT
fis-105	17	9	10	10	NUM
fis-105	17	10	f	f	NOUN
fis-105	17	11	126	126	NUM
fis-105	17	12	chemnitz	chemnitz	PROPN
fis-105	17	13	substrates	substrate	VERB
fis-105	17	14	di	di	NOUN
fis-105	17	15	erature	erature	NOUN
fis-105	17	16	bond	bond	NOUN
fis-105	17	17	peratures	perature	NOUN
fis-105	17	18	be	be	VERB
fis-105	17	19	ds	ds	ADJ
fis-105	17	20	on	on	ADP
fis-105	17	21	the	the	DET
fis-105	17	22	b	b	PROPN
fis-105	17	23	aling	ale	VERB
fis-105	17	24	temper	temper	NOUN
fis-105	17	25	onded	onde	VERB
fis-105	17	26	interf	interf	NOUN
fis-105	17	27	merically	merically	ADV
fis-105	17	28	or	or	CCONJ
fis-105	17	29	ding	ding	NOUN
fis-105	17	30	.	.	PUNCT
fis-105	18	1	the	the	DET
fis-105	18	2	m	m	PROPN
fis-105	18	3	bility	bility	NOUN
fis-105	18	4	to	to	ADP
fis-105	18	5	esti	esti	PROPN
fis-105	18	6	en	en	PROPN
fis-105	18	7	increases	increase	VERB
fis-105	18	8	compliance	compliance	NOUN
fis-105	18	9	n	n	NUM
fis-105	18	10	wafers	wafer	NOUN
fis-105	18	11	.	.	PUNCT
fis-105	19	1	ad	ad	NOUN
fis-105	19	2	e	e	NOUN
fis-105	19	3	influence	influence	NOUN
fis-105	19	4	o	o	X
fis-105	19	5	d	d	NOUN
fis-105	19	6	and	and	CCONJ
fis-105	19	7	discuss	discuss	VERB
fis-105	19	8	est	est	PROPN
fis-105	19	9	;	;	PUNCT
fis-105	19	10	silicon	silicon	NOUN
fis-105	19	11	d	d	X
fis-105	19	12	their	their	PRON
fis-105	19	13	structur	structur	NOUN
fis-105	19	14	ypical	ypical	ADJ
fis-105	19	15	compon	compon	NOUN
fis-105	19	16	often	often	ADV
fis-105	19	17	consist	consist	VERB
fis-105	19	18	0.3221	0.3221	NUM
fis-105	19	19	/	/	SYM
fis-105	19	20	igf	igf	NOUN
fis-105	19	21	-	-	NOUN
fis-105	19	22	esis	esis	NOUN
fis-105	19	23	.	.	PUNCT
fis-105	20	1	z	z	X
fis-105	20	2	;	;	PUNCT
fis-105	20	3	irectly	irectly	ADV
fis-105	20	4	or	or	CCONJ
fis-105	20	5	us	we	PRON
fis-105	20	6	ding	de	VERB
fis-105	20	7	as	as	ADP
fis-105	20	8	a	a	DET
fis-105	20	9	spe	spe	X
fis-105	20	10	elow	elow	NOUN
fis-105	20	11	400	400	NUM
fis-105	20	12	°	°	ADP
fis-105	20	13	c	c	NOUN
fis-105	20	14	onding	onde	VERB
fis-105	20	15	proc	proc	NOUN
fis-105	20	16	rature	rature	NOUN
fis-105	20	17	leads	lead	VERB
fis-105	20	18	face	face	NOUN
fis-105	20	19	.	.	PUNCT
fis-105	21	1	based	base	VERB
fis-105	21	2	o	o	NOUN
fis-105	21	3	by	by	ADP
fis-105	21	4	combin	combin	ADJ
fis-105	21	5	minimum	minimum	NOUN
fis-105	21	6	of	of	ADP
fis-105	21	7	imate	imate	PROPN
fis-105	21	8	the	the	DET
fis-105	21	9	st	st	PROPN
fis-105	21	10	with	with	ADP
fis-105	21	11	a	a	DET
fis-105	21	12	grow	grow	NOUN
fis-105	21	13	e	e	NOUN
fis-105	21	14	and	and	CCONJ
fis-105	21	15	the	the	DET
fis-105	21	16	cr	cr	PROPN
fis-105	21	17	dditional	dditional	PROPN
fis-105	21	18	to	to	ADP
fis-105	21	19	of	of	ADP
fis-105	22	1	different	different	ADJ
fis-105	22	2	p	p	NOUN
fis-105	22	3	sed	se	VERB
fis-105	22	4	.	.	PUNCT
fis-105	23	1	direct	direct	ADJ
fis-105	23	2	bondin	bondin	VERB
fis-105	23	3	res	re	NOUN
fis-105	23	4	become	become	VERB
fis-105	23	5	m	m	VERB
fis-105	23	6	nent	nent	ADJ
fis-105	23	7	size	size	NOUN
fis-105	23	8	in	in	ADP
fis-105	23	9	s	s	PROPN
fis-105	23	10	t	t	NOUN
fis-105	23	11	of	of	ADP
fis-105	23	12	two	two	NUM
fis-105	23	13	or	or	CCONJ
fis-105	23	14	m	m	PROPN
fis-105	23	15	15.03	15.03	NUM
fis-105	23	16	21	21	NUM
fis-105	23	17	sing	sing	NOUN
fis-105	23	18	ecial	ecial	ADJ
fis-105	23	19	c.	c.	NOUN
fis-105	23	20	in	in	ADP
fis-105	23	21	cess	cess	ADJ
fis-105	23	22	to	to	ADP
fis-105	23	23	a	a	PRON
fis-105	23	24	on	on	ADP
fis-105	23	25	a	a	DET
fis-105	23	26	ning	ning	NOUN
fis-105	23	27	the	the	DET
fis-105	23	28	tress	tress	ADJ
fis-105	23	29	wing	wing	NOUN
fis-105	23	30	rack	rack	VERB
fis-105	23	31	the	the	DET
fis-105	23	32	preng	preng	NOUN
fis-105	23	33	.	.	PUNCT
fis-105	24	1	more	more	ADV
fis-105	24	2	submore	submore	ADJ
fis-105	24	3	http://dx.medra.org/10.3221/igf-esis.15.03&auth=true	http://dx.medra.org/10.3221/igf-esis.15.03&auth=true	ADJ
fis-105	24	4	http://www.gruppofrattura.it	http://www.gruppofrattura.it	NOUN
fis-105	24	5	mailto	mailto	NOUN
fis-105	24	6	:	:	PUNCT
fis-105	24	7	klaus.vogel@s2005.tu-chemnitz.de	klaus.vogel@s2005.tu-chemnitz.de	PROPN
fis-105	24	8	mailto	mailto	NOUN
fis-105	24	9	:	:	PUNCT
fis-105	25	1	dirk.wuensch@zfm.tu-chemnitz.de	dirk.wuensch@zfm.tu-chemnitz.de	NUM
fis-105	25	2	k.	k.	NOUN
fis-105	25	3	v	v	ADJ
fis-105	25	4	22	22	NUM
fis-105	25	5	com	com	NOUN
fis-105	25	6	dur	dur	PROPN
fis-105	25	7	req	req	NOUN
fis-105	25	8	th	th	X
fis-105	25	9	all	all	DET
fis-105	25	10	ove	ove	VERB
fis-105	25	11	in	in	ADP
fis-105	25	12	like	like	INTJ
fis-105	25	13	clea	clea	PROPN
fis-105	25	14	tem	tem	PROPN
fis-105	25	15	low	low	PROPN
fis-105	25	16	bes	bes	PROPN
fis-105	25	17	in	in	ADP
fis-105	25	18	a	a	DET
fis-105	25	19	fre	fre	ADJ
fis-105	25	20	100	100	NUM
fis-105	25	21	to	to	PART
fis-105	25	22	hyd	hyd	VERB
fis-105	25	23	tem	tem	PROPN
fis-105	25	24	tem	tem	PROPN
fis-105	25	25	con	con	PROPN
fis-105	25	26	num	num	PROPN
fis-105	26	1	the	the	DET
fis-105	26	2	out	out	ADJ
fis-105	26	3	bon	bon	PROPN
fis-105	26	4	for	for	ADP
fis-105	26	5	vogel	vogel	PROPN
fis-105	26	6	et	et	PROPN
fis-105	26	7	alii	alii	PROPN
fis-105	26	8	,	,	PUNCT
fis-105	26	9	fra	fra	NOUN
fis-105	26	10	mponents	mponent	VERB
fis-105	26	11	an	an	DET
fis-105	26	12	ring	ring	NOUN
fis-105	26	13	the	the	DET
fis-105	26	14	man	man	NOUN
fis-105	26	15	quired	quire	VERB
fis-105	26	16	to	to	AUX
fis-105	26	17	char	char	NOUN
fis-105	26	18	he	he	PRON
fis-105	26	19	behaviour	behaviour	VERB
fis-105	26	20	o	o	NOUN
fis-105	26	21	technologies	technology	NOUN
fis-105	26	22	erview	erview	NOUN
fis-105	26	23	of	of	ADP
fis-105	26	24	diff	diff	NOUN
fis-105	26	25	without	without	ADP
fis-105	26	26	intermedia	intermedia	PROPN
fis-105	26	27	with	with	ADP
fis-105	26	28	intermedia	intermedia	PROPN
fis-105	26	29	particular	particular	ADJ
fis-105	26	30	,	,	PUNCT
fis-105	26	31	dir	dir	NOUN
fis-105	26	32	e	e	NOUN
fis-105	26	33	in	in	ADP
fis-105	26	34	eutectic	eutectic	ADJ
fis-105	26	35	an	an	DET
fis-105	26	36	and	and	CCONJ
fis-105	26	37	smoo	smoo	PROPN
fis-105	26	38	mperatures	mperature	NOUN
fis-105	26	39	ha	ha	INTJ
fis-105	26	40	w	w	PROPN
fis-105	26	41	pressure	pressure	NOUN
fis-105	26	42	pl	pl	NOUN
fis-105	26	43	sides	side	NOUN
fis-105	26	44	remote	remote	VERB
fis-105	26	45	a	a	DET
fis-105	26	46	fine	fine	ADJ
fis-105	26	47	vacuum	vacuum	NOUN
fis-105	26	48	quency	quency	NOUN
fis-105	26	49	of	of	ADP
fis-105	26	50	13	13	NUM
fis-105	26	51	0	0	NUM
fis-105	26	52	v	v	NOUN
fis-105	26	53	[	[	X
fis-105	26	54	4	4	NUM
fis-105	26	55	]	]	PUNCT
fis-105	26	56	.	.	PUNCT
fis-105	27	1	understand	understand	VERB
fis-105	27	2	drophilic	drophilic	ADJ
fis-105	27	3	fus	fus	PROPN
fis-105	27	4	mperatures	mperature	NOUN
fis-105	27	5	in	in	ADP
fis-105	27	6	mperature	mperature	NOUN
fis-105	27	7	is	be	AUX
fis-105	27	8	ntacting	ntacte	VERB
fis-105	27	9	the	the	DET
fis-105	27	10	w	w	PROPN
fis-105	27	11	mber	mber	NOUN
fis-105	27	12	of	of	ADP
fis-105	27	13	silan	silan	NOUN
fis-105	27	14	e	e	PROPN
fis-105	27	15	bond	bond	NOUN
fis-105	27	16	streng	streng	PROPN
fis-105	27	17	tside	tside	NOUN
fis-105	27	18	or	or	CCONJ
fis-105	27	19	throu	throu	ADJ
fis-105	27	20	nds	nd	NOUN
fis-105	27	21	between	between	ADP
fis-105	27	22	rm	rm	PROPN
fis-105	27	23	covalent	covalent	PROPN
fis-105	28	1	si	si	PROPN
fis-105	28	2	attura	attura	PROPN
fis-105	28	3	ed	ed	PROPN
fis-105	28	4	integrit	integrit	PROPN
fis-105	28	5	nd	nd	AUX
fis-105	28	6	have	have	AUX
fis-105	28	7	to	to	PART
fis-105	28	8	be	be	AUX
fis-105	28	9	nufacturing	nufacture	VERB
fis-105	28	10	p	p	ADJ
fis-105	28	11	racterise	racterise	NOUN
fis-105	28	12	such	such	ADJ
fis-105	28	13	of	of	ADP
fis-105	28	14	the	the	DET
fis-105	28	15	structu	structu	PROPN
fis-105	28	16	s	s	PROPN
fis-105	28	17	for	for	ADP
fis-105	28	18	joining	join	VERB
fis-105	28	19	ferent	ferent	NOUN
fis-105	28	20	bondin	bondin	VERB
fis-105	28	21	bo	bo	PROPN
fis-105	28	22	ate	eat	VERB
fis-105	28	23	layer	layer	NOUN
fis-105	28	24	sil	sil	PROPN
fis-105	28	25	bo	bo	PROPN
fis-105	28	26	wi	wi	PROPN
fis-105	28	27	pla	pla	PROPN
fis-105	28	28	an	an	PROPN
fis-105	28	29	(	(	PUNCT
fis-105	28	30	ab	ab	PROPN
fis-105	28	31	th	th	PROPN
fis-105	28	32	co	co	NOUN
fis-105	28	33	bo	bo	PROPN
fis-105	28	34	ate	eat	VERB
fis-105	28	35	layer	layer	NOUN
fis-105	28	36	eu	eu	PROPN
fis-105	28	37	ad	ad	PROPN
fis-105	28	38	gl	gl	PROPN
fis-105	28	39	rect	rect	NOUN
fis-105	28	40	bonding	bonding	NOUN
fis-105	28	41	or	or	CCONJ
fis-105	28	42	adhesive	adhesive	ADJ
fis-105	28	43	b	b	PROPN
fis-105	28	44	oth	oth	PROPN
fis-105	28	45	surfaces	surface	NOUN
fis-105	28	46	ave	ave	VERB
fis-105	28	47	to	to	PART
fis-105	28	48	be	be	AUX
fis-105	28	49	redu	redu	VERB
fis-105	28	50	lasma	lasma	NOUN
fis-105	28	51	or	or	CCONJ
fis-105	28	52	ion	ion	NOUN
fis-105	28	53	and	and	CCONJ
fis-105	28	54	sequenti	sequenti	PROPN
fis-105	28	55	m	m	PROPN
fis-105	28	56	with	with	ADP
fis-105	28	57	typica	typica	PROPN
fis-105	28	58	3.56	3.56	NUM
fis-105	28	59	mhz	mhz	NOUN
fis-105	28	60	is	be	AUX
fis-105	28	61	u	u	NOUN
fis-105	28	62	the	the	DET
fis-105	28	63	mechani	mechani	NOUN
fis-105	28	64	ion	ion	NOUN
fis-105	28	65	bonding	bonding	NOUN
fis-105	28	66	n	n	CCONJ
fis-105	28	67	order	order	NOUN
fis-105	28	68	to	to	PART
fis-105	28	69	dev	dev	VERB
fis-105	28	70	caused	cause	VERB
fis-105	28	71	by	by	ADP
fis-105	28	72	hy	hy	NOUN
fis-105	28	73	wafers	wafer	NOUN
fis-105	28	74	.	.	PUNCT
fis-105	29	1	the	the	DET
fis-105	29	2	b	b	PROPN
fis-105	29	3	nol	nol	NOUN
fis-105	29	4	groups	group	NOUN
fis-105	29	5	(	(	PUNCT
fis-105	29	6	si	si	PROPN
fis-105	29	7	gth	gth	PROPN
fis-105	29	8	between	between	ADP
fis-105	29	9	ugh	ugh	PROPN
fis-105	29	10	the	the	DET
fis-105	29	11	nativ	nativ	NOUN
fis-105	29	12	the	the	DET
fis-105	29	13	silanol	silanol	NOUN
fis-105	29	14	g	g	PROPN
fis-105	29	15	iloxane	iloxane	ADJ
fis-105	29	16	bond	bond	NOUN
fis-105	29	17	tà	tà	ADP
fis-105	29	18	strutturale	strutturale	NOUN
fis-105	29	19	,	,	PUNCT
fis-105	29	20	15	15	NUM
fis-105	29	21	e	e	NOUN
fis-105	29	22	joined	join	VERB
fis-105	29	23	by	by	ADP
fis-105	29	24	w	w	PROPN
fis-105	29	25	process	process	NOUN
fis-105	29	26	and	and	CCONJ
fis-105	29	27	t	t	PROPN
fis-105	29	28	h	h	NOUN
fis-105	29	29	structures	structure	NOUN
fis-105	29	30	.	.	PUNCT
fis-105	30	1	ure	ure	PROPN
fis-105	30	2	depends	depend	VERB
fis-105	30	3	o	o	PROPN
fis-105	30	4	two	two	NUM
fis-105	30	5	or	or	CCONJ
fis-105	30	6	mor	mor	PROPN
fis-105	30	7	ng	ng	PROPN
fis-105	30	8	technologi	technologi	NOUN
fis-105	30	9	onding	onde	VERB
fis-105	30	10	licon	licon	NOUN
fis-105	30	11	direct	direct	ADJ
fis-105	30	12	onding	onding	NOUN
fis-105	30	13	(	(	PUNCT
fis-105	30	14	sdb	sdb	NOUN
fis-105	30	15	)	)	PUNCT
fis-105	30	16	ith	ith	NOUN
fis-105	30	17	and	and	CCONJ
fis-105	30	18	witho	witho	PROPN
fis-105	30	19	asma	asma	PROPN
fis-105	30	20	activatio	activatio	PROPN
fis-105	30	21	nodic	nodic	ADV
fis-105	30	22	bondin	bondin	VERB
fis-105	30	23	b	b	NUM
fis-105	30	24	)	)	PUNCT
fis-105	30	25	hermoompression	hermoompression	NOUN
fis-105	30	26	onding	onde	VERB
fis-105	30	27	utectic	utectic	ADJ
fis-105	30	28	bondin	bondin	VERB
fis-105	30	29	dhesive	dhesive	ADJ
fis-105	30	30	bond	bond	NOUN
fis-105	30	31	las	las	PROPN
fis-105	30	32	frit	frit	PROPN
fis-105	30	33	bondi	bondi	PROPN
fis-105	30	34	t	t	PROPN
fis-105	30	35	has	have	VERB
fis-105	30	36	a	a	DET
fis-105	30	37	major	major	ADJ
fis-105	30	38	a	a	DET
fis-105	30	39	bonding	bonding	NOUN
fis-105	30	40	are	be	AUX
fis-105	30	41	r	r	NOUN
fis-105	30	42	before	before	SCONJ
fis-105	30	43	annea	annea	PROPN
fis-105	30	44	uced	uce	VERB
fis-105	30	45	.	.	PUNCT
fis-105	31	1	this	this	DET
fis-105	31	2	red	red	ADJ
fis-105	31	3	beam	beam	NOUN
fis-105	31	4	treatm	treatm	PROPN
fis-105	31	5	ial	ial	ADJ
fis-105	31	6	plasma	plasma	NOUN
fis-105	31	7	,	,	PUNCT
fis-105	31	8	a	a	DET
fis-105	31	9	c	c	NOUN
fis-105	31	10	al	al	PROPN
fis-105	31	11	ranges	range	NOUN
fis-105	31	12	of	of	ADP
fis-105	31	13	1	1	NUM
fis-105	31	14	used	use	VERB
fis-105	31	15	.	.	PUNCT
fis-105	32	1	compar	compar	NOUN
fis-105	32	2	ism	ism	NOUN
fis-105	32	3	of	of	ADP
fis-105	32	4	a	a	DET
fis-105	32	5	pla	pla	NOUN
fis-105	32	6	g.	g.	NOUN
fis-105	32	7	the	the	DET
fis-105	32	8	proce	proce	PROPN
fis-105	32	9	velop	velop	ADV
fis-105	32	10	strong	strong	ADJ
fis-105	32	11	ydrogen	ydrogen	NOUN
fis-105	32	12	bon	bon	NOUN
fis-105	32	13	bonding	bonding	NOUN
fis-105	32	14	stren	stren	NOUN
fis-105	32	15	i	i	PROPN
fis-105	32	16	-	-	PROPN
fis-105	32	17	oh	oh	INTJ
fis-105	32	18	)	)	PUNCT
fis-105	32	19	and	and	CCONJ
fis-105	32	20	wa	wa	ADP
fis-105	32	21	the	the	DET
fis-105	32	22	two	two	NUM
fis-105	32	23	waf	waf	NOUN
fis-105	32	24	ve	ve	NOUN
fis-105	32	25	oxide	oxide	NOUN
fis-105	32	26	to	to	ADP
fis-105	32	27	th	th	NUM
fis-105	32	28	groups	group	NOUN
fis-105	32	29	.	.	PUNCT
fis-105	33	1	by	by	ADP
fis-105	33	2	in	in	ADP
fis-105	33	3	ds	ds	ADJ
fis-105	33	4	[	[	X
fis-105	33	5	5	5	NUM
fis-105	33	6	-	-	SYM
fis-105	33	7	8	8	NUM
fis-105	33	8	]	]	PUNCT
fis-105	33	9	.	.	PUNCT
fis-105	34	1	5	5	NUM
fis-105	34	2	(	(	PUNCT
fis-105	34	3	2011	2011	NUM
fis-105	34	4	)	)	PUNCT
fis-105	34	5	21	21	NUM
fis-105	34	6	-	-	SYM
fis-105	34	7	28	28	NUM
fis-105	34	8	;	;	PUNCT
fis-105	34	9	wafer	wafer	VERB
fis-105	34	10	bonding	bonding	NOUN
fis-105	34	11	to	to	PART
fis-105	34	12	provide	provide	VERB
fis-105	34	13	da	da	NOUN
fis-105	34	14	on	on	ADP
fis-105	34	15	the	the	DET
fis-105	34	16	bonde	bonde	PROPN
fis-105	34	17	re	re	PROPN
fis-105	34	18	substrates	substrate	VERB
fis-105	34	19	es	es	ADP
fis-105	34	20	[	[	X
fis-105	34	21	2	2	NUM
fis-105	34	22	,	,	PUNCT
fis-105	34	23	3	3	NUM
fis-105	34	24	]	]	PUNCT
fis-105	34	25	.	.	PUNCT
fis-105	35	1	mate	mate	NOUN
fis-105	35	2	)	)	PUNCT
fis-105	35	3	ut	ut	PROPN
fis-105	35	4	on	on	ADP
fis-105	35	5	polish	polish	NOUN
fis-105	35	6	of	of	ADP
fis-105	35	7	an	an	DET
fis-105	35	8	dopin	dopin	PROPN
fis-105	35	9	chem	chem	NOUN
fis-105	35	10	ng	ng	PROPN
fis-105	35	11	silico	silico	NOUN
fis-105	35	12	mater	mater	NOUN
fis-105	35	13	ng	ng	PROPN
fis-105	35	14	subst	subst	VERB
fis-105	35	15	ing	ing	ADJ
fis-105	35	16	silico	silico	NOUN
fis-105	35	17	polym	polym	NOUN
fis-105	35	18	(	(	PUNCT
fis-105	35	19	ceram	ceram	PROPN
fis-105	35	20	epoxy	epoxy	PROPN
fis-105	35	21	ceram	ceram	PROPN
fis-105	35	22	ing	e	VERB
fis-105	35	23	subst	subst	NOUN
fis-105	35	24	table	table	NOUN
fis-105	35	25	1	1	NUM
fis-105	35	26	:	:	PUNCT
fis-105	35	27	overv	overv	NOUN
fis-105	35	28	advantage	advantage	NOUN
fis-105	35	29	wit	wit	NOUN
fis-105	35	30	required	require	VERB
fis-105	35	31	.	.	PUNCT
fis-105	36	1	thi	thi	AUX
fis-105	36	2	aling	ale	VERB
fis-105	36	3	them	they	PRON
fis-105	36	4	to	to	ADP
fis-105	36	5	duction	duction	NOUN
fis-105	36	6	can	can	AUX
fis-105	36	7	b	b	PROPN
fis-105	36	8	ment	ment	VERB
fis-105	36	9	.	.	PUNCT
fis-105	37	1	the	the	DET
fis-105	37	2	sur	sur	PROPN
fis-105	37	3	commonly	commonly	ADV
fis-105	37	4	us	we	PRON
fis-105	37	5	10	10	NUM
fis-105	37	6	pa	pa	NOUN
fis-105	37	7	to	to	ADP
fis-105	37	8	20	20	NUM
fis-105	37	9	p	p	NOUN
fis-105	37	10	red	red	ADJ
fis-105	37	11	to	to	PART
fis-105	37	12	conven	conven	VERB
fis-105	37	13	sma	sma	VERB
fis-105	37	14	treatmen	treatman	NOUN
fis-105	37	15	ess	ess	PROPN
fis-105	37	16	includes	include	VERB
fis-105	37	17	t	t	PROPN
fis-105	37	18	g	g	PROPN
fis-105	37	19	covalent	covalent	NOUN
fis-105	37	20	bo	bo	PROPN
fis-105	37	21	nds	nds	PROPN
fis-105	37	22	between	between	ADP
fis-105	37	23	t	t	PROPN
fis-105	37	24	ngth	ngth	PROPN
fis-105	37	25	especiall	especiall	PROPN
fis-105	37	26	ater	ater	PROPN
fis-105	37	27	molecule	molecule	NOUN
fis-105	37	28	fers	fer	NOUN
fis-105	37	29	.	.	PUNCT
fis-105	38	1	thereby	thereby	ADV
fis-105	38	2	he	he	PRON
fis-105	38	3	bulk	bulk	ADJ
fis-105	38	4	mater	mater	NOUN
fis-105	38	5	ncreasing	ncrease	VERB
fis-105	38	6	the	the	DET
fis-105	38	7	;	;	PUNCT
fis-105	38	8	doi	doi	NOUN
fis-105	38	9	:	:	PUNCT
fis-105	38	10	10.3221	10.3221	NUM
fis-105	38	11	/	/	SYM
fis-105	38	12	ig	ig	PROPN
fis-105	38	13	g.	g.	NOUN
fis-105	38	14	to	to	PART
fis-105	38	15	ensure	ensure	VERB
fis-105	38	16	ata	ata	PROPN
fis-105	38	17	for	for	ADP
fis-105	38	18	furth	furth	NOUN
fis-105	38	19	ed	ed	PROPN
fis-105	38	20	interface	interface	NOUN
fis-105	38	21	an	an	DET
fis-105	38	22	directly	directly	ADV
fis-105	38	23	or	or	CCONJ
fis-105	38	24	rial	rial	NOUN
fis-105	38	25	he	he	PRON
fis-105	38	26	d	d	ADJ
fis-105	38	27	wafers	wafer	NOUN
fis-105	38	28	of	of	ADP
fis-105	38	29	ny	ny	PROPN
fis-105	38	30	orientation	orientation	PROPN
fis-105	38	31	ng	ng	PROPN
fis-105	38	32	with	with	ADP
fis-105	38	33	natur	natur	PROPN
fis-105	38	34	mical	mical	PROPN
fis-105	38	35	,	,	PUNCT
fis-105	38	36	or	or	CCONJ
fis-105	38	37	therm	therm	NOUN
fis-105	38	38	on	on	ADP
fis-105	38	39	,	,	PUNCT
fis-105	38	40	borosilicat	borosilicat	NOUN
fis-105	38	41	rials	rial	NOUN
fis-105	38	42	such	such	ADJ
fis-105	38	43	as	as	ADP
fis-105	38	44	c	c	PROPN
fis-105	38	45	trate	trate	VERB
fis-105	38	46	and	and	CCONJ
fis-105	38	47	au	au	ADV
fis-105	38	48	on	on	ADP
fis-105	38	49	/	/	SYM
fis-105	38	50	glass	glass	NOUN
fis-105	38	51	,	,	PUNCT
fis-105	38	52	pla	pla	PROPN
fis-105	38	53	mers	mer	NOUN
fis-105	38	54	,	,	PUNCT
fis-105	38	55	special	special	ADJ
fis-105	38	56	m	m	PROPN
fis-105	38	57	mics	mic	NOUN
fis-105	38	58	,	,	PUNCT
fis-105	38	59	metals	metal	NOUN
fis-105	38	60	,	,	PUNCT
fis-105	38	61	y	y	PROPN
fis-105	38	62	resins	resin	NOUN
fis-105	38	63	,	,	PUNCT
fis-105	38	64	uv	uv	NOUN
fis-105	38	65	mic	mic	ADJ
fis-105	38	66	adhesives	adhesive	NOUN
fis-105	38	67	trate	trate	VERB
fis-105	38	68	+	+	CCONJ
fis-105	38	69	glass	glass	NOUN
fis-105	38	70	f	f	NOUN
fis-105	38	71	view	view	NOUN
fis-105	38	72	of	of	ADP
fis-105	38	73	bondin	bondin	VERB
fis-105	38	74	thin	thin	ADJ
fis-105	38	75	the	the	DET
fis-105	38	76	pack	pack	NOUN
fis-105	38	77	is	be	AUX
fis-105	38	78	technology	technology	NOUN
fis-105	38	79	o	o	NOUN
fis-105	38	80	temperatur	temperatur	NOUN
fis-105	38	81	be	be	AUX
fis-105	38	82	done	do	VERB
fis-105	38	83	using	use	VERB
fis-105	38	84	rface	rface	NOUN
fis-105	38	85	can	can	AUX
fis-105	38	86	be	be	AUX
fis-105	38	87	sed	se	VERB
fis-105	38	88	mode	mode	NOUN
fis-105	38	89	is	be	AUX
fis-105	38	90	th	th	X
fis-105	38	91	pa	pa	NOUN
fis-105	38	92	with	with	ADP
fis-105	38	93	a	a	DET
fis-105	38	94	con	con	NOUN
fis-105	38	95	ntionally	ntionally	ADV
fis-105	38	96	bias	bias	VERB
fis-105	38	97	nt	not	PART
fis-105	38	98	on	on	ADP
fis-105	38	99	the	the	DET
fis-105	38	100	su	su	PROPN
fis-105	38	101	the	the	DET
fis-105	38	102	pre	pre	ADJ
fis-105	38	103	-	-	ADJ
fis-105	38	104	bond	bond	ADJ
fis-105	38	105	nds	nd	NOUN
fis-105	38	106	.	.	PROPN
fis-105	39	1	for	for	ADP
fis-105	39	2	hyd	hyd	NOUN
fis-105	39	3	the	the	DET
fis-105	39	4	water	water	NOUN
fis-105	39	5	mo	mo	PROPN
fis-105	39	6	ly	ly	PROPN
fis-105	39	7	depends	depend	VERB
fis-105	39	8	on	on	ADP
fis-105	39	9	s.	s.	PROPN
fis-105	39	10	a	a	DET
fis-105	39	11	subseque	subseque	ADJ
fis-105	39	12	y	y	PROPN
fis-105	39	13	,	,	PUNCT
fis-105	39	14	the	the	DET
fis-105	39	15	water	water	NOUN
fis-105	39	16	m	m	NOUN
fis-105	39	17	rial	rial	ADJ
fis-105	39	18	.	.	PUNCT
fis-105	40	1	the	the	DET
fis-105	40	2	wafe	wafe	ADJ
fis-105	40	3	temperature	temperature	NOUN
fis-105	40	4	gf	gf	NOUN
fis-105	40	5	-	-	NOUN
fis-105	40	6	esis.15.03	esis.15.03	VERB
fis-105	40	7	their	their	PRON
fis-105	40	8	functio	functio	NOUN
fis-105	40	9	her	her	PRON
fis-105	40	10	fe	fe	NOUN
fis-105	40	11	-	-	NOUN
fis-105	40	12	simula	simula	PROPN
fis-105	40	13	nd	nd	ADP
fis-105	40	14	the	the	DET
fis-105	40	15	bondi	bondi	PROPN
fis-105	40	16	using	use	VERB
fis-105	40	17	certain	certain	ADJ
fis-105	40	18	f	f	PROPN
fis-105	40	19	silicon	silicon	NOUN
fis-105	40	20	(	(	PUNCT
fis-105	40	21	wafe	wafe	ADJ
fis-105	40	22	and	and	CCONJ
fis-105	40	23	basic	basic	ADJ
fis-105	40	24	ral	ral	ADJ
fis-105	40	25	,	,	PUNCT
fis-105	40	26	thin	thin	ADJ
fis-105	40	27	mal	mal	ADJ
fis-105	40	28	oxide	oxide	NOUN
fis-105	40	29	)	)	PUNCT
fis-105	40	30	te	te	ADP
fis-105	40	31	glass	glass	PROPN
fis-105	40	32	cu	cu	PROPN
fis-105	40	33	,	,	PUNCT
fis-105	40	34	au	au	PROPN
fis-105	40	35	,	,	PUNCT
fis-105	40	36	ti	ti	PROPN
fis-105	40	37	astics	astics	PROPN
fis-105	40	38	/	/	SYM
fis-105	40	39	materials	material	NOUN
fis-105	40	40	pcb	pcb	NOUN
fis-105	40	41	,	,	PUNCT
fis-105	40	42	tapes	tape	NOUN
fis-105	40	43	)	)	PUNCT
fis-105	40	44	,	,	PUNCT
fis-105	40	45	adhesives	adhesive	NOUN
fis-105	40	46	,	,	PUNCT
fis-105	40	47	,	,	PUNCT
fis-105	40	48	photo	photo	NOUN
fis-105	40	49	resist	resist	NOUN
fis-105	40	50	frit	frit	NOUN
fis-105	40	51	substrate	substrate	NOUN
fis-105	40	52	ng	ng	PROPN
fis-105	40	53	technologie	technologie	PROPN
fis-105	40	54	kaging	kage	VERB
fis-105	40	55	proces	proce	NOUN
fis-105	40	56	y	y	PROPN
fis-105	40	57	uses	use	VERB
fis-105	40	58	the	the	PRON
fis-105	40	59	for	for	ADP
fis-105	40	60	res	re	NOUN
fis-105	40	61	up	up	ADP
fis-105	40	62	to	to	ADP
fis-105	40	63	110	110	NUM
fis-105	40	64	g	g	NOUN
fis-105	40	65	surface	surface	NOUN
fis-105	40	66	activ	activ	NOUN
fis-105	40	67	activated	activate	VERB
fis-105	40	68	by	by	ADP
fis-105	40	69	he	he	PRON
fis-105	40	70	reactive	reactive	VERB
fis-105	40	71	io	io	PROPN
fis-105	40	72	ntinuous	ntinuous	PROPN
fis-105	40	73	gas	gas	PROPN
fis-105	40	74	f	f	PROPN
fis-105	40	75	s	s	VERB
fis-105	40	76	voltage	voltage	NOUN
fis-105	40	77	the	the	DET
fis-105	40	78	i	i	NOUN
fis-105	40	79	urface	urface	NOUN
fis-105	40	80	,	,	PUNCT
fis-105	40	81	it	it	PRON
fis-105	40	82	is	be	AUX
fis-105	40	83	n	n	ADV
fis-105	40	84	ding	de	VERB
fis-105	40	85	at	at	ADP
fis-105	40	86	room	room	NOUN
fis-105	40	87	drophilic	drophilic	PROPN
fis-105	41	1	dire	dire	X
fis-105	41	2	olecules	olecules	PROPN
fis-105	41	3	loca	loca	PROPN
fis-105	41	4	n	n	CCONJ
fis-105	41	5	the	the	DET
fis-105	41	6	number	number	NOUN
fis-105	41	7	ent	ent	NOUN
fis-105	41	8	heat	heat	NOUN
fis-105	41	9	treat	treat	NOUN
fis-105	41	10	molecules	molecule	NOUN
fis-105	41	11	dif	dif	ADV
fis-105	41	12	ers	er	NOUN
fis-105	41	13	move	move	VERB
fis-105	41	14	clos	clo	NOUN
fis-105	41	15	the	the	DET
fis-105	41	16	opposin	opposin	NOUN
fis-105	41	17	onality	onality	NOUN
fis-105	41	18	and	and	CCONJ
fis-105	41	19	re	re	NOUN
fis-105	41	20	ations	ation	NOUN
fis-105	41	21	,	,	PUNCT
fis-105	41	22	signifi	signifi	NOUN
fis-105	41	23	ing	ing	ADJ
fis-105	41	24	process	process	NOUN
fis-105	41	25	it	it	PRON
fis-105	41	26	n	n	NUM
fis-105	41	27	intermediat	intermediat	NOUN
fis-105	41	28	tempe	tempe	NOUN
fis-105	41	29	fers	fer	NOUN
fis-105	41	30	low	low	ADJ
fis-105	41	31	tem	tem	PROPN
fis-105	41	32	110	110	NUM
fis-105	41	33	…	…	PUNCT
fis-105	41	34	high	high	ADJ
fis-105	41	35	te	te	ADP
fis-105	41	36	800	800	NUM
fis-105	41	37	…	…	SYM
fis-105	41	38	210	210	NUM
fis-105	41	39	…	…	SYM
fis-105	41	40	300	300	NUM
fis-105	41	41	…	…	PUNCT
fis-105	41	42	au	au	NOUN
fis-105	41	43	-	-	PUNCT
fis-105	41	44	si	si	X
fis-105	41	45	au	au	PROPN
fis-105	41	46	-	-	PROPN
fis-105	41	47	sn	sn	PROPN
fis-105	41	48	cu	cu	PROPN
fis-105	41	49	-	-	PROPN
fis-105	41	50	sn	sn	PROPN
fis-105	41	51	al	al	PROPN
fis-105	41	52	-	-	PUNCT
fis-105	41	53	si	si	PROPN
fis-105	41	54	5	5	NUM
fis-105	41	55	ts	ts	NOUN
fis-105	41	56	room	room	NOUN
fis-105	41	57	t	t	PROPN
fis-105	41	58	e	e	PROPN
fis-105	41	59	430	430	NUM
fis-105	41	60	°	°	NOUN
fis-105	41	61	c	c	NOUN
fis-105	41	62	es	es	NOUN
fis-105	41	63	.	.	PROPN
fis-105	41	64	s	s	PART
fis-105	42	1	because	because	SCONJ
fis-105	42	2	no	no	DET
fis-105	42	3	rmation	rmation	NOUN
fis-105	42	4	of	of	ADP
fis-105	42	5	co	co	PROPN
fis-105	42	6	00	00	PROPN
fis-105	42	7	°	°	SYM
fis-105	42	8	c	c	X
fis-105	42	9	.	.	PUNCT
fis-105	43	1	for	for	ADP
fis-105	43	2	m	m	VERB
fis-105	43	3	vating	vate	VERB
fis-105	43	4	proced	proce	VERB
fis-105	43	5	a	a	DET
fis-105	43	6	variety	variety	NOUN
fis-105	43	7	of	of	ADP
fis-105	43	8	n	n	ADV
fis-105	43	9	-	-	PUNCT
fis-105	43	10	etching	etch	VERB
fis-105	43	11	(	(	PUNCT
fis-105	43	12	ri	ri	NOUN
fis-105	43	13	flow	flow	NOUN
fis-105	43	14	in	in	ADP
fis-105	43	15	the	the	DET
fis-105	43	16	re	re	NOUN
fis-105	43	17	ions	ion	NOUN
fis-105	43	18	are	be	AUX
fis-105	43	19	only	only	ADV
fis-105	43	20	necessary	necessary	ADJ
fis-105	43	21	to	to	ADP
fis-105	43	22	e	e	PROPN
fis-105	43	23	m	m	PROPN
fis-105	43	24	temperatur	temperatur	NOUN
fis-105	43	25	ect	ect	ADP
fis-105	43	26	bonding	bonding	NOUN
fis-105	43	27	,	,	PUNCT
fis-105	43	28	t	t	PROPN
fis-105	43	29	ted	te	VERB
fis-105	43	30	on	on	ADP
fis-105	43	31	the	the	DET
fis-105	43	32	o	o	NOUN
fis-105	43	33	r	r	NOUN
fis-105	43	34	of	of	ADP
fis-105	43	35	hydrogen	hydrogen	NOUN
fis-105	43	36	tment	tment	NOUN
fis-105	43	37	(	(	PUNCT
fis-105	43	38	anneal	anneal	ADJ
fis-105	43	39	ffuse	ffuse	NOUN
fis-105	43	40	out	out	ADP
fis-105	43	41	eith	eith	NOUN
fis-105	43	42	ser	ser	NOUN
fis-105	43	43	towards	towards	ADP
fis-105	43	44	ea	ea	PROPN
fis-105	43	45	ng	ng	PROPN
fis-105	43	46	silanol	silanol	PROPN
fis-105	43	47	gro	gro	PROPN
fis-105	43	48	eliability	eliability	NOUN
fis-105	43	49	as	as	ADP
fis-105	43	50	w	w	PROPN
fis-105	43	51	ficant	ficant	PROPN
fis-105	43	52	materia	materia	PROPN
fis-105	43	53	tself	tself	PROPN
fis-105	43	54	.	.	PUNCT
fis-105	44	1	wafer	wafer	VERB
fis-105	44	2	b	b	PROPN
fis-105	44	3	te	te	PROPN
fis-105	44	4	layers	layer	NOUN
fis-105	44	5	.	.	PUNCT
fis-105	45	1	tab	tab	NOUN
fis-105	45	2	erature	erature	NOUN
fis-105	45	3	mperature	mperature	NOUN
fis-105	45	4	bo	bo	PROPN
fis-105	45	5	…	…	PUNCT
fis-105	45	6	400	400	NUM
fis-105	45	7	°	°	NOUN
fis-105	45	8	c	c	NOUN
fis-105	45	9	,	,	PUNCT
fis-105	45	10	emperature	emperature	NOUN
fis-105	45	11	b	b	NOUN
fis-105	45	12	…	…	PUNCT
fis-105	45	13	1100	1100	NUM
fis-105	45	14	°	°	NUM
fis-105	45	15	c	c	NOUN
fis-105	45	16	…	…	PUNCT
fis-105	45	17	450	450	NUM
fis-105	45	18	°	°	NUM
fis-105	45	19	c	c	NOUN
fis-105	45	20	…	…	SYM
fis-105	45	21	400	400	NUM
fis-105	45	22	°	°	NUM
fis-105	45	23	c	c	PROPN
fis-105	45	24	363	363	NUM
fis-105	45	25	°	°	NOUN
fis-105	45	26	c	c	NOUN
fis-105	45	27	,	,	PUNCT
fis-105	45	28	n	n	PRON
fis-105	45	29	280	280	NUM
fis-105	45	30	°	°	NOUN
fis-105	45	31	c	c	NOUN
fis-105	45	32	,	,	PUNCT
fis-105	45	33	n	n	PROPN
fis-105	45	34	350	350	NUM
fis-105	45	35	°	°	NOUN
fis-105	45	36	c	c	PROPN
fis-105	45	37	,	,	PUNCT
fis-105	45	38	577	577	NUM
fis-105	45	39	°	°	NOUN
fis-105	45	40	c	c	NOUN
fis-105	45	41	temperature	temperature	NOUN
fis-105	45	42	c	c	NOUN
fis-105	45	43	additional	additional	ADJ
fis-105	45	44	in	in	ADP
fis-105	45	45	ovalent	ovalent	ADJ
fis-105	45	46	bonds	bond	NOUN
fis-105	45	47	many	many	ADJ
fis-105	45	48	applica	applica	PROPN
fis-105	45	49	dures	dure	VERB
fis-105	45	50	prior	prior	ADV
fis-105	45	51	to	to	ADP
fis-105	45	52	f	f	PROPN
fis-105	45	53	low	low	ADJ
fis-105	45	54	pressure	pressure	NOUN
fis-105	45	55	ie	ie	ADJ
fis-105	45	56	)	)	PUNCT
fis-105	45	57	.	.	PUNCT
fis-105	46	1	the	the	DET
fis-105	46	2	rie	rie	PROPN
fis-105	46	3	eactor	eactor	PROPN
fis-105	46	4	chamb	chamb	PROPN
fis-105	46	5	y	y	PROPN
fis-105	46	6	accelerated	accelerate	VERB
fis-105	46	7	b	b	SYM
fis-105	46	8	explain	explain	VERB
fis-105	46	9	the	the	DET
fis-105	46	10	p	p	NOUN
fis-105	46	11	re	re	ADP
fis-105	46	12	and	and	CCONJ
fis-105	46	13	an	an	DET
fis-105	46	14	an	an	DET
fis-105	46	15	the	the	DET
fis-105	46	16	bonding	bonding	NOUN
fis-105	46	17	opposing	oppose	VERB
fis-105	46	18	waf	waf	NOUN
fis-105	46	19	n	n	PROPN
fis-105	46	20	bonds	bond	NOUN
fis-105	46	21	and	and	CCONJ
fis-105	46	22	ling	ling	NOUN
fis-105	46	23	)	)	PUNCT
fis-105	46	24	is	be	AUX
fis-105	46	25	carried	carry	VERB
fis-105	46	26	her	she	PRON
fis-105	46	27	along	along	ADP
fis-105	46	28	the	the	DET
fis-105	46	29	ach	ach	PROPN
fis-105	46	30	other	other	ADJ
fis-105	46	31	and	and	CCONJ
fis-105	46	32	oups	oups	PROPN
fis-105	46	33	react	react	VERB
fis-105	46	34	wi	wi	PROPN
fis-105	46	35	well	well	ADV
fis-105	46	36	as	as	SCONJ
fis-105	46	37	the	the	DET
fis-105	46	38	qu	qu	PROPN
fis-105	46	39	al	al	PROPN
fis-105	46	40	parameters	parameter	NOUN
fis-105	46	41	onding	onde	VERB
fis-105	46	42	descr	descr	PROPN
fis-105	46	43	b.	b.	PROPN
fis-105	46	44	1	1	NUM
fis-105	46	45	provides	provide	VERB
fis-105	46	46	onding	onding	NOUN
fis-105	46	47	onding	onding	NOUN
fis-105	46	48	…	…	PUNCT
fis-105	46	49	300	300	NUM
fis-105	46	50	°	°	NUM
fis-105	46	51	c	c	NOUN
fis-105	46	52	ntermediate	ntermediate	NOUN
fis-105	46	53	la	la	PROPN
fis-105	46	54	s	s	PROPN
fis-105	46	55	for	for	ADP
fis-105	46	56	joining	join	VERB
fis-105	46	57	ations	ation	NOUN
fis-105	46	58	these	these	DET
fis-105	46	59	h	h	NOUN
fis-105	46	60	bonding	bonding	NOUN
fis-105	46	61	suc	suc	VERB
fis-105	46	62	e	e	NOUN
fis-105	46	63	plasma	plasma	NOUN
fis-105	46	64	mo	mo	PROPN
fis-105	46	65	e	e	NOUN
fis-105	46	66	-	-	NOUN
fis-105	46	67	system	system	NOUN
fis-105	46	68	oper	oper	NOUN
fis-105	46	69	ber	ber	PROPN
fis-105	46	70	.	.	PUNCT
fis-105	47	1	an	an	DET
fis-105	47	2	opera	opera	NOUN
fis-105	47	3	by	by	ADP
fis-105	47	4	approxima	approxima	NOUN
fis-105	47	5	procedure	procedure	NOUN
fis-105	47	6	of	of	ADP
fis-105	47	7	nnealing	nneale	VERB
fis-105	47	8	at	at	ADP
fis-105	47	9	h	h	NOUN
fis-105	47	10	process	process	NOUN
fis-105	47	11	at	at	ADP
fis-105	47	12	ro	ro	PROPN
fis-105	47	13	fer	fer	PROPN
fis-105	47	14	surfaces	surface	VERB
fis-105	47	15	a	a	DET
fis-105	47	16	therefore	therefore	ADV
fis-105	47	17	on	on	ADP
fis-105	47	18	d	d	PROPN
fis-105	47	19	out	out	ADV
fis-105	47	20	,	,	PUNCT
fis-105	47	21	to	to	PART
fis-105	47	22	incr	incr	PROPN
fis-105	47	23	e	e	PROPN
fis-105	47	24	interface	interface	NOUN
fis-105	47	25	to	to	ADP
fis-105	47	26	d	d	PROPN
fis-105	47	27	form	form	VERB
fis-105	47	28	hydro	hydro	NOUN
fis-105	47	29	ith	ith	ADP
fis-105	47	30	each	each	DET
fis-105	47	31	othe	othe	ADJ
fis-105	47	32	uality	uality	NOUN
fis-105	47	33	s	s	VERB
fis-105	47	34	are	be	AUX
fis-105	47	35	ribes	ribe	NOUN
fis-105	47	36	s	s	PRON
fis-105	47	37	an	an	DET
fis-105	47	38	ayers	ayers	PROPN
fis-105	47	39	two	two	NUM
fis-105	47	40	high	high	ADJ
fis-105	47	41	ch	ch	NOUN
fis-105	47	42	as	as	ADP
fis-105	47	43	odes	ode	NOUN
fis-105	47	44	.	.	PUNCT
fis-105	48	1	rates	rate	NOUN
fis-105	48	2	ation	ation	PROPN
fis-105	48	3	ately	ately	ADV
fis-105	48	4	f	f	PROPN
fis-105	48	5	the	the	DET
fis-105	48	6	high	high	ADJ
fis-105	48	7	oom	oom	NOUN
fis-105	48	8	after	after	ADP
fis-105	48	9	n	n	PRON
fis-105	48	10	the	the	DET
fis-105	48	11	rease	rease	NOUN
fis-105	48	12	the	the	DET
fis-105	48	13	ogen	ogen	PROPN
fis-105	48	14	er	er	INTJ
fis-105	48	15	to	to	ADP
fis-105	48	16	http://dx.medra.org/10.3221/igf-esis.15.03&auth=true	http://dx.medra.org/10.3221/igf-esis.15.03&auth=true	PROPN
fis-105	48	17	http://www.gruppofrattura.it	http://www.gruppofrattura.it	X
fis-105	48	18	th	th	X
fis-105	48	19	mic	mic	NOUN
fis-105	48	20	exp	exp	X
fis-105	48	21	th	th	X
fis-105	48	22	th	th	X
fis-105	48	23	as	as	ADP
fis-105	48	24	uns	uns	X
fis-105	48	25	th	th	X
fis-105	48	26	app	app	PROPN
fis-105	48	27	par	par	PROPN
fis-105	48	28	wh	wh	VERB
fis-105	48	29	ym	ym	PROPN
fis-105	48	30	on	on	ADP
fis-105	48	31	ana	ana	PROPN
fis-105	48	32	t	t	PROPN
fis-105	48	33	he	he	PRON
fis-105	48	34	fracture	fracture	PROPN
fis-105	48	35	tou	tou	PROPN
fis-105	48	36	cro	cro	PROPN
fis-105	48	37	-	-	PUNCT
fis-105	48	38	chevronperimental	chevronperimental	PROPN
fis-105	48	39	de	de	X
fis-105	48	40	heory	heory	NOUN
fis-105	48	41	he	he	PRON
fis-105	48	42	analy	analy	AUX
fis-105	48	43	width	width	VERB
fis-105	48	44	w	w	NOUN
fis-105	48	45	of	of	ADP
fis-105	48	46	10	10	NUM
fis-105	48	47	m	m	VERB
fis-105	48	48	he	he	PRON
fis-105	48	49	height	height	NOUN
fis-105	48	50	of	of	ADP
fis-105	48	51	th	th	INTJ
fis-105	48	52	well	well	ADV
fis-105	48	53	as	as	ADP
fis-105	48	54	the	the	DET
fis-105	48	55	structured	structured	ADJ
fis-105	48	56	ch	ch	NOUN
fis-105	48	57	he	he	PRON
fis-105	48	58	bonded	bond	VERB
fis-105	48	59	chi	chi	PROPN
fis-105	48	60	proximately	proximately	PROPN
fis-105	48	61	t	t	PROPN
fis-105	48	62	rameters	rameter	NOUN
fis-105	48	63	widt	widt	PRON
fis-105	48	64	ick	ick	VERB
fis-105	48	65			PROPN
fis-105	48	66	hile	hile	VERB
fis-105	48	67	the	the	DET
fis-105	48	68	maxi	maxi	ADJ
fis-105	48	69	min	min	NOUN
fis-105	48	70	is	be	AUX
fis-105	48	71	determin	determin	VERB
fis-105	48	72	ne	ne	NOUN
fis-105	48	73	possibility	possibility	NOUN
fis-105	48	74	alysis	alysis	NOUN
fis-105	48	75	.	.	PUNCT
fis-105	49	1	with	with	ADP
fis-105	49	2	t	t	PROPN
fis-105	49	3	ughness	ughness	NOUN
fis-105	49	4	is	be	AUX
fis-105	49	5	on	on	ADP
fis-105	49	6	specimen	speciman	NOUN
fis-105	49	7	,	,	PUNCT
fis-105	49	8	the	the	DET
fis-105	49	9	etermination	etermination	NOUN
fis-105	49	10	c	c	AUX
fis-105	49	11	ysed	yse	VERB
fis-105	49	12	samples	sample	NOUN
fis-105	49	13	w	w	PROPN
fis-105	49	14	and	and	CCONJ
fis-105	49	15	thicknes	thickne	NOUN
fis-105	49	16	m	m	PROPN
fis-105	49	17	,	,	PUNCT
fis-105	49	18	fig	fig	NOUN
fis-105	49	19	.	.	PUNCT
fis-105	50	1	1	1	X
fis-105	50	2	.	.	X
fis-105	50	3	he	he	PRON
fis-105	50	4	specimen	speciman	NOUN
fis-105	51	1	d	d	NOUN
fis-105	51	2	structure	structure	PROPN
fis-105	51	3	hei	hei	PROPN
fis-105	51	4	hip	hip	PROPN
fis-105	51	5	varies	vary	VERB
fis-105	51	6	for	for	ADP
fis-105	51	7	d	d	PROPN
fis-105	51	8	figu	figu	ADJ
fis-105	51	9	ip	ip	NOUN
fis-105	51	10	is	be	AUX
fis-105	51	11	loaded	load	VERB
fis-105	51	12	p	p	NOUN
fis-105	51	13	to	to	ADP
fis-105	51	14	a	a	DET
fis-105	51	15	mode	mode	NOUN
fis-105	51	16	i	i	PRON
fis-105	51	17	th	th	X
fis-105	51	18	and	and	CCONJ
fis-105	51	19	thickn	thickn	ADJ
fis-105	51	20	max	max	PROPN
fis-105	51	21	min	min	PROPN
fis-105	51	22	f	f	PROPN
fis-105	51	23	y	y	PROPN
fis-105	51	24	t	t	PROPN
fis-105	51	25	w	w	PROPN
fis-105	51	26			VERB
fis-105	51	27			ADJ
fis-105	51	28	imum	imum	ADJ
fis-105	51	29	force	force	NOUN
fis-105	51	30	f	f	AUX
fis-105	51	31	ned	ne	VERB
fis-105	51	32	by	by	ADP
fis-105	51	33	fe	fe	NOUN
fis-105	51	34	-	-	NOUN
fis-105	51	35	sim	sim	NOUN
fis-105	51	36	to	to	PART
fis-105	51	37	estimate	estimate	VERB
fis-105	51	38	th	th	PRON
fis-105	51	39	an	an	DET
fis-105	51	40	extension	extension	NOUN
fis-105	51	41	ne	ne	NOUN
fis-105	51	42	of	of	ADP
fis-105	51	43	the	the	DET
fis-105	51	44	suita	suita	PROPN
fis-105	51	45	e	e	PROPN
fis-105	51	46	fracture	fracture	PROPN
fis-105	51	47	tou	tou	PROPN
fis-105	51	48	can	can	AUX
fis-105	51	49	be	be	AUX
fis-105	51	50	execut	execut	VERB
fis-105	51	51	consist	consist	VERB
fis-105	51	52	of	of	ADP
fis-105	51	53	tw	tw	PRON
fis-105	51	54	ss	ss	PROPN
fis-105	51	55	t	t	PROPN
fis-105	51	56	are	be	AUX
fis-105	51	57	equal	equal	ADJ
fis-105	51	58	depends	depend	VERB
fis-105	51	59	on	on	ADP
fis-105	51	60	t	t	PROPN
fis-105	51	61	ight	ight	NOUN
fis-105	51	62	,	,	PUNCT
fis-105	51	63	fig	fig	NOUN
fis-105	51	64	.	.	PUNCT
fis-105	52	1	2	2	X
fis-105	52	2	.	.	X
fis-105	52	3	different	different	ADJ
fis-105	52	4	mat	mat	NOUN
fis-105	52	5	ure	ure	PROPN
fis-105	52	6	1	1	NUM
fis-105	52	7	:	:	PUNCT
fis-105	52	8	geometr	geometr	NOUN
fis-105	52	9	figure	figure	NOUN
fis-105	52	10	2	2	NUM
fis-105	52	11	:	:	PUNCT
fis-105	52	12	mic	mic	ADJ
fis-105	52	13	perpendicular	perpendicular	NOUN
fis-105	52	14	i	i	PRON
fis-105	52	15	crack	crack	VERB
fis-105	52	16	open	open	ADJ
fis-105	52	17	ness	ness	NOUN
fis-105	52	18	by	by	ADP
fis-105	52	19	fmax	fmax	PROPN
fis-105	52	20	can	can	AUX
fis-105	52	21	be	be	AUX
fis-105	52	22	mulation	mulation	ADJ
fis-105	52	23	.	.	PUNCT
fis-105	53	1	he	he	PRON
fis-105	53	2	stress	stress	VERB
fis-105	53	3	inten	inten	VERB
fis-105	53	4	n	n	PROPN
fis-105	53	5	of	of	ADP
fis-105	53	6	the	the	DET
fis-105	53	7	cra	cra	PROPN
fis-105	53	8	k.	k.	PROPN
fis-105	53	9	vogel	vogel	PROPN
fis-105	53	10	et	et	PROPN
fis-105	53	11	able	able	ADJ
fis-105	53	12	values	value	NOUN
fis-105	53	13	to	to	ADP
fis-105	53	14	ughness	ughness	ADJ
fis-105	53	15	of	of	ADP
fis-105	53	16	th	th	PROPN
fis-105	53	17	ted	te	VERB
fis-105	53	18	by	by	ADP
fis-105	53	19	combin	combin	NOUN
fis-105	53	20	wo	will	AUX
fis-105	53	21	single	single	ADJ
fis-105	53	22	chi	chi	NOUN
fis-105	54	1	[	[	X
fis-105	54	2	9	9	NUM
fis-105	54	3	,	,	PUNCT
fis-105	54	4	10	10	NUM
fis-105	54	5	]	]	PUNCT
fis-105	54	6	.	.	PUNCT
fis-105	55	1	the	the	DET
fis-105	55	2	the	the	DET
fis-105	55	3	height	height	NOUN
fis-105	55	4	of	of	ADP
fis-105	55	5	while	while	SCONJ
fis-105	55	6	the	the	DET
fis-105	55	7	h	h	PROPN
fis-105	55	8	terial	terial	PROPN
fis-105	55	9	combina	combina	PROPN
fis-105	55	10	ry	ry	PROPN
fis-105	55	11	of	of	ADP
fis-105	55	12	a	a	DET
fis-105	55	13	micro	micro	NOUN
fis-105	55	14	-	-	PROPN
fis-105	55	15	ch	ch	PROPN
fis-105	55	16	cro	cro	PROPN
fis-105	55	17	-	-	NOUN
fis-105	55	18	chevron	chevron	NOUN
fis-105	55	19	-	-	PUNCT
fis-105	55	20	sp	sp	NOUN
fis-105	55	21	to	to	ADP
fis-105	55	22	the	the	DET
fis-105	55	23	x	x	PROPN
fis-105	55	24	-	-	PROPN
fis-105	55	25	y	y	PROPN
fis-105	55	26	-	-	PUNCT
fis-105	55	27	pl	pl	NOUN
fis-105	55	28	ning	ning	NOUN
fis-105	55	29	.	.	PUNCT
fis-105	56	1	so	so	ADV
fis-105	56	2	the	the	DET
fis-105	56	3	measured	measured	ADJ
fis-105	56	4	du	du	NOUN
fis-105	56	5	nsity	nsity	NOUN
fis-105	56	6	coefficie	coefficie	VERB
fis-105	56	7	ack	ack	VERB
fis-105	56	8	length	length	NOUN
fis-105	56	9	,	,	PUNCT
fis-105	56	10	t	t	PROPN
fis-105	56	11	alii	alii	PROPN
fis-105	56	12	,	,	PUNCT
fis-105	56	13	frattura	frattura	NOUN
fis-105	56	14	ed	ed	PROPN
fis-105	56	15	o	o	NOUN
fis-105	56	16	describe	describe	VERB
fis-105	56	17	the	the	DET
fis-105	56	18	his	his	PRON
fis-105	56	19	specimen	speciman	NOUN
fis-105	56	20	c	c	NOUN
fis-105	56	21	ning	ning	PROPN
fis-105	56	22	experim	experim	PROPN
fis-105	56	23	ips	ips	PROPN
fis-105	56	24	bonded	bond	VERB
fis-105	56	25	to	to	ADP
fis-105	56	26	analysis	analysis	NOUN
fis-105	56	27	is	be	AUX
fis-105	56	28	fo	fo	ADP
fis-105	56	29	the	the	DET
fis-105	56	30	unstructu	unstructu	ADJ
fis-105	56	31	height	height	NOUN
fis-105	56	32	of	of	ADP
fis-105	56	33	the	the	DET
fis-105	56	34	ations	ation	NOUN
fis-105	56	35	.	.	PUNCT
fis-105	57	1	hevron	hevron	PROPN
fis-105	57	2	-	-	PUNCT
fis-105	57	3	specim	specim	PROPN
fis-105	57	4	pecimen	peciman	NOUN
fis-105	57	5	prepa	prepa	PROPN
fis-105	57	6	lane	lane	PROPN
fis-105	57	7	in	in	ADP
fis-105	57	8	front	front	ADJ
fis-105	57	9	fracture	fracture	PROPN
fis-105	57	10	toug	toug	NOUN
fis-105	57	11	uring	ure	VERB
fis-105	57	12	a	a	DET
fis-105	57	13	tensil	tensil	NOUN
fis-105	57	14	ent	ent	NOUN
fis-105	57	15	is	be	AUX
fis-105	57	16	the	the	DET
fis-105	57	17	com	com	NOUN
fis-105	57	18	the	the	DET
fis-105	57	19	complian	complian	PROPN
fis-105	57	20	d	d	PROPN
fis-105	57	21	integrità	integrità	PROPN
fis-105	57	22	struttu	struttu	NOUN
fis-105	57	23	damage	damage	NOUN
fis-105	57	24	beha	beha	NOUN
fis-105	57	25	can	can	AUX
fis-105	57	26	be	be	AUX
fis-105	57	27	determ	determ	NOUN
fis-105	57	28	ment	ment	NOUN
fis-105	57	29	with	with	ADP
fis-105	57	30	num	num	PROPN
fis-105	57	31	ogether	ogether	PROPN
fis-105	57	32	.	.	PUNCT
fis-105	58	1	beca	beca	PROPN
fis-105	58	2	ocused	ocuse	VERB
fis-105	58	3	on	on	ADP
fis-105	58	4	spe	spe	PROPN
fis-105	58	5	ured	ured	ADJ
fis-105	58	6	wafer	wafer	NOUN
fis-105	58	7	hw1	hw1	PROPN
fis-105	58	8	e	e	NOUN
fis-105	58	9	structured	structured	ADJ
fis-105	58	10	men	man	NOUN
fis-105	58	11	compared	compare	VERB
fis-105	58	12	ared	are	VERB
fis-105	58	13	from	from	ADP
fis-105	58	14	a	a	DET
fis-105	58	15	pro	pro	NOUN
fis-105	58	16	of	of	ADP
fis-105	58	17	the	the	DET
fis-105	58	18	sharp	sharp	ADJ
fis-105	58	19	ghness	ghness	NOUN
fis-105	58	20	kic	kic	PROPN
fis-105	58	21	c	c	PROPN
fis-105	58	22	le	le	PROPN
fis-105	58	23	test	test	PROPN
fis-105	58	24	,	,	PUNCT
fis-105	58	25	the	the	DET
fis-105	58	26	m	m	PROPN
fis-105	58	27	mpliance	mpliance	NOUN
fis-105	58	28	meth	meth	NOUN
fis-105	58	29	nce	nce	NOUN
fis-105	58	30	of	of	ADP
fis-105	58	31	the	the	DET
fis-105	58	32	s	s	X
fis-105	58	33	turale	turale	NOUN
fis-105	58	34	,	,	PUNCT
fis-105	58	35	15	15	NUM
fis-105	58	36	(	(	PUNCT
fis-105	58	37	2011	2011	NUM
fis-105	58	38	)	)	PUNCT
fis-105	58	39	aviour	aviour	NOUN
fis-105	58	40	of	of	ADP
fis-105	58	41	the	the	DET
fis-105	58	42	mined	mine	VERB
fis-105	58	43	numeri	numeri	PROPN
fis-105	58	44	merical	merical	ADJ
fis-105	58	45	analysi	analysi	NOUN
fis-105	58	46	ause	ause	VERB
fis-105	58	47	they	they	PRON
fis-105	58	48	hav	hav	AUX
fis-105	58	49	ecimens	ecimen	NOUN
fis-105	58	50	with	with	ADP
fis-105	58	51	1	1	NUM
fis-105	58	52	and	and	CCONJ
fis-105	58	53	the	the	DET
fis-105	58	54	heig	heig	NOUN
fis-105	58	55	chip	chip	NOUN
fis-105	58	56	is	be	AUX
fis-105	58	57	kept	keep	VERB
fis-105	58	58	to	to	ADP
fis-105	58	59	an	an	DET
fis-105	58	60	one	one	NUM
fis-105	58	61	cent	cent	NOUN
fis-105	58	62	ocessed	ocesse	VERB
fis-105	58	63	wafer	wafer	NOUN
fis-105	58	64	.	.	PUNCT
fis-105	59	1	notch	notch	NOUN
fis-105	59	2	.	.	PUNCT
fis-105	60	1	the	the	DET
fis-105	60	2	li	li	PROPN
fis-105	60	3	can	can	AUX
fis-105	60	4	be	be	AUX
fis-105	60	5	calcul	calcul	PROPN
fis-105	60	6	minimum	minimum	NOUN
fis-105	60	7	of	of	ADP
fis-105	60	8	t	t	PROPN
fis-105	60	9	hod	hod	NOUN
fis-105	60	10	.	.	PUNCT
fis-105	61	1	it	it	PRON
fis-105	61	2	comb	comb	VERB
fis-105	61	3	specimen	specimen	PROPN
fis-105	61	4	inc	inc	PROPN
fis-105	61	5	)	)	PUNCT
fis-105	61	6	21	21	NUM
fis-105	61	7	-	-	SYM
fis-105	61	8	28	28	NUM
fis-105	61	9	;	;	PUNCT
fis-105	61	10	doi	doi	NOUN
fis-105	61	11	:	:	PUNCT
fis-105	61	12	10	10	NUM
fis-105	61	13	bonded	bond	VERB
fis-105	61	14	inter	inter	PROPN
fis-105	61	15	ically	ically	ADV
fis-105	61	16	and	and	CCONJ
fis-105	61	17	exp	exp	NOUN
fis-105	61	18	is	be	AUX
fis-105	61	19	.	.	PUNCT
fis-105	62	1	ve	ve	VERB
fis-105	62	2	a	a	DET
fis-105	62	3	quadrati	quadrati	NOUN
fis-105	62	4	both	both	CCONJ
fis-105	62	5	a	a	DET
fis-105	62	6	width	width	ADJ
fis-105	62	7	ght	ght	PROPN
fis-105	62	8	of	of	ADP
fis-105	62	9	the	the	DET
fis-105	62	10	stru	stru	NOUN
fis-105	62	11	constant	constant	PROPN
fis-105	62	12	,	,	PUNCT
fis-105	62	13	th	th	PROPN
fis-105	62	14	t	t	NOUN
fis-105	62	15	coin	coin	NOUN
fis-105	62	16	.	.	PUNCT
fis-105	63	1	ifting	ifte	VERB
fis-105	63	2	of	of	ADP
fis-105	63	3	the	the	DET
fis-105	63	4	c	c	NOUN
fis-105	63	5	lated	late	VERB
fis-105	63	6	against	against	ADP
fis-105	63	7	the	the	DET
fis-105	63	8	stress	stress	NOUN
fis-105	63	9	inte	inte	PROPN
fis-105	63	10	ines	ines	PROPN
fis-105	63	11	experim	experim	NOUN
fis-105	63	12	creases	crease	VERB
fis-105	63	13	too	too	ADV
fis-105	63	14	.	.	PUNCT
fis-105	64	1	0.3221	0.3221	NUM
fis-105	64	2	/	/	SYM
fis-105	64	3	igf	igf	NOUN
fis-105	64	4	-	-	NOUN
fis-105	64	5	esis	esis	NOUN
fis-105	64	6	.	.	PUNCT
fis-105	65	1	rface	rface	NOUN
fis-105	65	2	.	.	PUNCT
fis-105	66	1	based	base	VERB
fis-105	66	2	o	o	NOUN
fis-105	66	3	perimentally	perimentally	ADV
fis-105	66	4	.	.	PUNCT
fis-105	67	1	c	c	NOUN
fis-105	67	2	footprint	footprint	NOUN
fis-105	67	3	,	,	PUNCT
fis-105	67	4	t	t	PROPN
fis-105	67	5	h	h	PROPN
fis-105	67	6	and	and	CCONJ
fis-105	67	7	a	a	DET
fis-105	67	8	thickn	thickn	ADJ
fis-105	67	9	uctured	uctured	ADJ
fis-105	67	10	wafer	wafer	NOUN
fis-105	67	11	he	he	PRON
fis-105	67	12	height	height	NOUN
fis-105	67	13	of	of	ADP
fis-105	67	14	crack	crack	VERB
fis-105	67	15	fronts	front	NOUN
fis-105	67	16	le	le	X
fis-105	67	17	the	the	DET
fis-105	67	18	geomet	geomet	NOUN
fis-105	67	19	(	(	PUNCT
fis-105	67	20	1	1	NUM
fis-105	67	21	)	)	PUNCT
fis-105	67	22	ensity	ensity	NOUN
fis-105	67	23	coeffic	coeffic	ADJ
fis-105	67	24	ent	ent	NOUN
fis-105	67	25	with	with	ADP
fis-105	67	26	num	num	NOUN
fis-105	67	27	by	by	ADP
fis-105	67	28	keeping	keep	VERB
fis-105	67	29	15.03	15.03	NUM
fis-105	67	30	23	23	NUM
fis-105	67	31	on	on	ADP
fis-105	67	32	a	a	DET
fis-105	67	33	the	the	DET
fis-105	67	34	their	their	PRON
fis-105	67	35	ness	ness	NOUN
fis-105	68	1	r	r	NOUN
fis-105	68	2	hw2	hw2	PROPN
fis-105	69	1	f	f	X
fis-105	69	2	the	the	DET
fis-105	69	3	eads	eads	PROPN
fis-105	69	4	rical	rical	PROPN
fis-105	69	5	cient	cient	PROPN
fis-105	69	6	meric	meric	PROPN
fis-105	69	7	the	the	DET
fis-105	69	8	http://dx.medra.org/10.3221/igf-esis.15.03&auth=true	http://dx.medra.org/10.3221/igf-esis.15.03&auth=true	PROPN
fis-105	69	9	http://www.gruppofrattura.it	http://www.gruppofrattura.it	PROPN
fis-105	69	10	k.	k.	PROPN
fis-105	69	11	v	v	PROPN
fis-105	69	12	24	24	NUM
fis-105	69	13	dis	di	NOUN
fis-105	69	14	rela	rela	VERB
fis-105	69	15	the	the	DET
fis-105	69	16	aft	aft	NOUN
fis-105	70	1	[	[	X
fis-105	70	2	10	10	NUM
fis-105	70	3	the	the	DET
fis-105	70	4	its	its	PRON
fis-105	70	5	tou	tou	NOUN
fis-105	70	6	ex	ex	X
fis-105	70	7	the	the	DET
fis-105	70	8	pre	pre	ADJ
fis-105	70	9	hou	hou	PROPN
fis-105	70	10	and	and	CCONJ
fis-105	70	11	i	i	PRON
fis-105	70	12	vogel	vogel	PROPN
fis-105	70	13	et	et	PROPN
fis-105	70	14	alii	alii	PROPN
fis-105	70	15	,	,	PUNCT
fis-105	70	16	fra	fra	NOUN
fis-105	70	17	placement	placement	NOUN
fis-105	70	18	uz	uz	PROPN
fis-105	70	19	ative	ative	ADJ
fis-105	70	20	crack	crack	NOUN
fis-105	70	21	len	len	NOUN
fis-105	70	22	a	a	DET
fis-105	70	23	w	w	NOUN
fis-105	70	24			NOUN
fis-105	70	25			NUM
fis-105	70	26	e	e	NOUN
fis-105	70	27	compliance	compliance	NOUN
fis-105	70	28	(	(	PUNCT
fis-105	70	29	)	)	PUNCT
fis-105	70	30	c	c	NOUN
fis-105	70	31			X
fis-105	70	32			NOUN
fis-105	70	33	ter	ter	NOUN
fis-105	70	34	scaling	scale	VERB
fis-105	70	35	the	the	DET
fis-105	70	36	0	0	NUM
fis-105	70	37	]	]	X
fis-105	70	38	'	'	PUNCT
fis-105	70	39	(	(	PUNCT
fis-105	70	40	)	)	PUNCT
fis-105	70	41	c	c	NOUN
fis-105	70	42			NUM
fis-105	70	43			NUM
fis-105	70	44	e	e	NOUN
fis-105	70	45	function	function	NOUN
fis-105	70	46	of	of	ADP
fis-105	70	47	(	(	PUNCT
fis-105	70	48	)	)	PUNCT
fis-105	70	49	y	y	PROPN
fis-105	70	50			NUM
fis-105	70	51			NUM
fis-105	70	52	minimum	minimum	NOUN
fis-105	70	53	,	,	PUNCT
fis-105	70	54	t	t	NOUN
fis-105	70	55	ughness	ughness	NOUN
fis-105	70	56	.	.	PUNCT
fis-105	71	1	xperiment	xperiment	NOUN
fis-105	71	2	n	n	PROPN
fis-105	71	3	addition	addition	NOUN
fis-105	71	4	micro	micro	NOUN
fis-105	71	5	-	-	NOUN
fis-105	71	6	chev	chev	ADJ
fis-105	71	7	divided	divide	VERB
fis-105	71	8	int	int	NOUN
fis-105	71	9	e	e	NOUN
fis-105	71	10	particle	particle	NOUN
fis-105	71	11	conc	conc	NOUN
fis-105	71	12	e	e	NOUN
fis-105	71	13	-	-	NOUN
fis-105	71	14	bonded	bond	VERB
fis-105	71	15	at	at	ADP
fis-105	71	16	r	r	NOUN
fis-105	71	17	urs	urs	PROPN
fis-105	71	18	.	.	PUNCT
fis-105	72	1	the	the	DET
fis-105	72	2	anne	anne	PROPN
fis-105	72	3	d	d	PROPN
fis-105	72	4	the	the	DET
fis-105	72	5	bottom	bottom	NOUN
fis-105	72	6	i	i	PRON
fis-105	72	7	attura	attura	VERB
fis-105	72	8	ed	ed	PROPN
fis-105	72	9	integrit	integrit	PROPN
fis-105	72	10	z	z	PROPN
fis-105	72	11	constant	constant	PROPN
fis-105	72	12	,	,	PUNCT
fis-105	72	13	the	the	DET
fis-105	72	14	ngths	ngth	NOUN
fis-105	72	15	0	0	NUM
fis-105	72	16	0	0	NUM
fis-105	72	17	a	a	DET
fis-105	72	18	w	w	NOUN
fis-105	72	19			X
fis-105	72	20			NUM
fis-105	72	21	c(	c(	NOUN
fis-105	72	22	)	)	PUNCT
fis-105	72	23	can	can	AUX
fis-105	72	24	be	be	AUX
fis-105	72	25	i	i	PRON
fis-105	72	26	(	(	PUNCT
fis-105	72	27	)	)	PUNCT
fis-105	72	28	zu	zu	SYM
fis-105	72	29	f	f	NOUN
fis-105	72	30			NOUN
fis-105	72	31			PROPN
fis-105	72	32	e	e	NOUN
fis-105	72	33	compliance	compliance	NOUN
fis-105	72	34	(	(	PUNCT
fis-105	72	35	1	1	NUM
fis-105	72	36	²	²	NUM
fis-105	72	37	e	e	NOUN
fis-105	72	38	t	t	NOUN
fis-105	72	39	c	c	NOUN
fis-105	72	40			X
fis-105	72	41			ADJ
fis-105	72	42			NUM
fis-105	72	43			ADJ
fis-105	72	44			ADJ
fis-105	72	45			NOUN
fis-105	72	46	the	the	DET
fis-105	72	47	stress	stress	NOUN
fis-105	72	48	inte	inte	NOUN
fis-105	72	49	1	1	NUM
fis-105	72	50	2	2	NUM
fis-105	72	51	d	d	NOUN
fis-105	72	52	c	c	X
fis-105	72	53	d	d	ADV
fis-105	72	54			VERB
fis-105	72	55			PROPN
fis-105	72	56			PROPN
fis-105	72	57	the	the	DET
fis-105	72	58	stress	stress	NOUN
fis-105	72	59	int	int	PROPN
fis-105	72	60	t	t	PROPN
fis-105	72	61	to	to	ADP
fis-105	72	62	the	the	DET
fis-105	72	63	numer	numer	PROPN
fis-105	72	64	vron	vron	NOUN
fis-105	72	65	-	-	PUNCT
fis-105	72	66	test	test	NOUN
fis-105	72	67	.	.	PUNCT
fis-105	73	1	bef	bef	NOUN
fis-105	73	2	to	to	ADP
fis-105	73	3	the	the	DET
fis-105	73	4	followi	followi	NOUN
fis-105	73	5	centration	centration	NOUN
fis-105	73	6	ha	ha	INTJ
fis-105	73	7	room	room	NOUN
fis-105	73	8	tempera	tempera	NOUN
fis-105	73	9	ealing	eale	VERB
fis-105	73	10	conditi	conditi	NOUN
fis-105	73	11	of	of	ADP
fis-105	73	12	the	the	DET
fis-105	73	13	specim	specim	NOUN
fis-105	73	14	tà	tà	VERB
fis-105	73	15	strutturale	strutturale	NOUN
fis-105	73	16	,	,	PUNCT
fis-105	73	17	15	15	NUM
fis-105	73	18	e	e	NOUN
fis-105	73	19	reaction	reaction	NOUN
fis-105	73	20	for	for	ADP
fis-105	73	21	1	1	NUM
fis-105	73	22	1	1	NUM
fis-105	73	23	a	a	DET
fis-105	73	24	w	w	NOUN
fis-105	73	25			X
fis-105	73	26			PRON
fis-105	73	27	interpolated	interpolate	VERB
fis-105	73	28	,	,	PUNCT
fis-105	73	29	with	with	ADP
fis-105	73	30	the	the	DET
fis-105	73	31	thic	thic	ADJ
fis-105	73	32	)	)	PUNCT
fis-105	73	33			X
fis-105	73	34	ensity	ensity	NOUN
fis-105	73	35	coeffic	coeffic	NOUN
fis-105	73	36	1	1	NUM
fis-105	73	37	0	0	NUM
fis-105	73	38	0	0	NUM
fis-105	73	39	'	'	NUM
fis-105	73	40	(	(	PUNCT
fis-105	73	41	)	)	PUNCT
fis-105	73	42			NOUN
fis-105	73	43			ADP
fis-105	73	44			NOUN
fis-105	73	45			X
fis-105	73	46			VERB
fis-105	73	47			VERB
fis-105	73	48			NOUN
fis-105	73	49	tensity	tensity	NOUN
fis-105	73	50	coeffi	coeffi	VERB
fis-105	73	51	rical	rical	ADJ
fis-105	73	52	determin	determin	NOUN
fis-105	73	53	fore	fore	NOUN
fis-105	73	54	carrying	carry	VERB
fis-105	73	55	ing	ing	ADJ
fis-105	73	56	steps	step	NOUN
fis-105	73	57	.	.	PUNCT
fis-105	74	1	fir	fir	NOUN
fis-105	74	2	as	as	SCONJ
fis-105	74	3	to	to	PART
fis-105	74	4	be	be	AUX
fis-105	74	5	reduc	reduc	PROPN
fis-105	74	6	ature	ature	NOUN
fis-105	74	7	afterwar	afterwar	ADJ
fis-105	74	8	ions	ion	NOUN
fis-105	74	9	can	can	AUX
fis-105	74	10	vary	vary	VERB
fis-105	74	11	men	man	NOUN
fis-105	74	12	,	,	PUNCT
fis-105	74	13	fig	fig	NOUN
fis-105	74	14	.	.	PUNCT
fis-105	75	1	3	3	NUM
fis-105	75	2	.	.	X
fis-105	75	3	b	b	X
fis-105	75	4	figu	figu	VERB
fis-105	75	5	5	5	NUM
fis-105	75	6	(	(	PUNCT
fis-105	75	7	2011	2011	NUM
fis-105	75	8	)	)	PUNCT
fis-105	75	9	21	21	NUM
fis-105	75	10	-	-	SYM
fis-105	75	11	28	28	NUM
fis-105	75	12	;	;	PUNCT
fis-105	75	13	rces	rce	NOUN
fis-105	75	14	f	f	PROPN
fis-105	75	15	are	be	AUX
fis-105	75	16	sim	sim	ADJ
fis-105	75	17	using	use	VERB
fis-105	75	18	the	the	DET
fis-105	75	19	equ	equ	PROPN
fis-105	75	20	ckness	ckness	PROPN
fis-105	75	21	t	t	PROPN
fis-105	75	22	of	of	ADP
fis-105	75	23	the	the	DET
fis-105	75	24	cient	cient	NOUN
fis-105	75	25	can	can	AUX
fis-105	75	26	be	be	AUX
fis-105	75	27	d	d	NOUN
fis-105	75	28	cient	cient	NOUN
fis-105	75	29	ymin	ymin	NOUN
fis-105	75	30	c	c	PROPN
fis-105	75	31	nation	nation	NOUN
fis-105	75	32	of	of	ADP
fis-105	75	33	the	the	DET
fis-105	75	34	out	out	NOUN
fis-105	75	35	the	the	DET
fis-105	75	36	expe	expe	ADJ
fis-105	75	37	rst	rst	PROPN
fis-105	75	38	,	,	PUNCT
fis-105	75	39	all	all	DET
fis-105	75	40	si	si	PROPN
fis-105	75	41	wafe	wafe	PROPN
fis-105	75	42	ced	ce	VERB
fis-105	75	43	within	within	ADP
fis-105	75	44	a	a	DET
fis-105	75	45	s	s	NOUN
fis-105	75	46	rds	rd	NOUN
fis-105	75	47	.	.	PUNCT
fis-105	76	1	before	before	ADP
fis-105	76	2	di	di	X
fis-105	76	3	y	y	PROPN
fis-105	76	4	between	between	ADP
fis-105	76	5	dif	dif	ADV
fis-105	76	6	before	before	ADP
fis-105	76	7	starting	start	VERB
fis-105	76	8	ure	ure	PROPN
fis-105	76	9	3	3	NUM
fis-105	76	10	:	:	PUNCT
fis-105	76	11	preparati	preparati	NOUN
fis-105	76	12	;	;	PUNCT
fis-105	76	13	doi	doi	NOUN
fis-105	76	14	:	:	PUNCT
fis-105	76	15	10.3221	10.3221	NUM
fis-105	76	16	/	/	SYM
fis-105	76	17	ig	ig	PROPN
fis-105	76	18	mulated	mulate	VERB
fis-105	76	19	subje	subje	PROPN
fis-105	76	20	uation	uation	PROPN
fis-105	76	21	e	e	NOUN
fis-105	76	22	sample	sample	NOUN
fis-105	76	23	,	,	PUNCT
fis-105	76	24	the	the	DET
fis-105	76	25	determined	determined	ADJ
fis-105	76	26	can	can	AUX
fis-105	76	27	be	be	AUX
fis-105	76	28	calcula	calcula	NOUN
fis-105	76	29	stress	stress	NOUN
fis-105	76	30	intensi	intensi	NOUN
fis-105	76	31	eriments	eriment	NOUN
fis-105	76	32	,	,	PUNCT
fis-105	76	33	the	the	DET
fis-105	76	34	ers	er	NOUN
fis-105	76	35	are	be	AUX
fis-105	76	36	rca	rca	NOUN
fis-105	76	37	-	-	PUNCT
fis-105	76	38	c	c	PROPN
fis-105	76	39	spin	spin	NOUN
fis-105	76	40	dryer	dryer	NOUN
fis-105	76	41	,	,	PUNCT
fis-105	76	42	aft	aft	VERB
fis-105	76	43	icing	ice	VERB
fis-105	76	44	the	the	DET
fis-105	76	45	wafe	wafe	ADJ
fis-105	76	46	fferent	fferent	NOUN
fis-105	76	47	batche	batche	PROPN
fis-105	76	48	g	g	PROPN
fis-105	76	49	the	the	DET
fis-105	76	50	experim	experim	NOUN
fis-105	76	51	ion	ion	NOUN
fis-105	76	52	of	of	ADP
fis-105	76	53	the	the	DET
fis-105	76	54	micr	micr	PROPN
fis-105	76	55	gf	gf	PROPN
fis-105	76	56	-	-	ADJ
fis-105	76	57	esis.15.03	esis.15.03	NOUN
fis-105	76	58	ected	ecte	VERB
fis-105	76	59	to	to	ADP
fis-105	76	60	a	a	DET
fis-105	76	61	wel	wel	PROPN
fis-105	76	62	e	e	PROPN
fis-105	76	63	young	young	PROPN
fis-105	76	64	’s	’s	PART
fis-105	76	65	mo	mo	PROPN
fis-105	76	66	ated	ate	VERB
fis-105	76	67	.	.	PUNCT
fis-105	77	1	insertin	insertin	PROPN
fis-105	77	2	ity	ity	PROPN
fis-105	77	3	coefficient	coefficient	NOUN
fis-105	77	4	samples	sample	NOUN
fis-105	77	5	have	have	AUX
fis-105	77	6	cleaned	clean	VERB
fis-105	77	7	befor	befor	NOUN
fis-105	77	8	ter	ter	NOUN
fis-105	77	9	rinsing	rinse	VERB
fis-105	77	10	the	the	DET
fis-105	77	11	fer	fer	PROPN
fis-105	77	12	stacks	stack	NOUN
fis-105	77	13	into	into	ADP
fis-105	77	14	es	es	NOUN
fis-105	77	15	.	.	PUNCT
fis-105	78	1	to	to	PART
fis-105	78	2	initiate	initiate	VERB
fis-105	78	3	ment	ment	PROPN
fis-105	78	4	,	,	PUNCT
fis-105	78	5	the	the	DET
fis-105	78	6	spec	spec	PROPN
fis-105	78	7	ro	ro	NOUN
fis-105	78	8	-	-	NOUN
fis-105	78	9	chevron	chevron	ADJ
fis-105	78	10	-	-	PUNCT
fis-105	78	11	sam	sam	PROPN
fis-105	78	12	ll	ll	AUX
fis-105	78	13	defined	define	VERB
fis-105	78	14	cra	cra	PROPN
fis-105	78	15	odulus	odulus	NOUN
fis-105	78	16	e	e	PROPN
fis-105	78	17	and	and	CCONJ
fis-105	78	18	ng	ng	PROPN
fis-105	78	19	ymin	ymin	NOUN
fis-105	78	20	in	in	ADP
fis-105	78	21	t	t	NOUN
fis-105	78	22	the	the	DET
fis-105	78	23	maximu	maximu	NOUN
fis-105	78	24	e	e	X
fis-105	78	25	to	to	PART
fis-105	78	26	be	be	AUX
fis-105	78	27	prepa	prepa	PROPN
fis-105	78	28	re	re	ADP
fis-105	78	29	applying	apply	VERB
fis-105	78	30	th	th	X
fis-105	78	31	e	e	NOUN
fis-105	78	32	wafers	wafer	NOUN
fis-105	78	33	in	in	ADP
fis-105	78	34	de	de	X
fis-105	78	35	o	o	NOUN
fis-105	78	36	specimens	specimen	NOUN
fis-105	78	37	,	,	PUNCT
fis-105	78	38	t	t	PROPN
fis-105	78	39	e	e	PROPN
fis-105	78	40	the	the	DET
fis-105	78	41	force	force	NOUN
fis-105	78	42	,	,	PUNCT
fis-105	78	43	tw	tw	VERB
fis-105	78	44	cimen	ciman	NOUN
fis-105	78	45	has	have	VERB
fis-105	78	46	to	to	ADP
fis-105	78	47	b	b	NOUN
fis-105	78	48	mples	mple	NOUN
fis-105	78	49	.	.	PUNCT
fis-105	79	1	ack	ack	VERB
fis-105	79	2	propagati	propagati	NOUN
fis-105	79	3	the	the	DET
fis-105	79	4	poissons	poisson	NOUN
fis-105	79	5	eq	eq	ADJ
fis-105	79	6	.	.	PUNCT
fis-105	80	1	(	(	PUNCT
fis-105	80	2	1	1	X
fis-105	80	3	)	)	PUNCT
fis-105	80	4	leads	lead	VERB
fis-105	80	5	um	um	INTJ
fis-105	80	6	force	force	NOUN
fis-105	80	7	is	be	AUX
fis-105	80	8	m	m	VERB
fis-105	80	9	ared	ared	ADJ
fis-105	80	10	.	.	PUNCT
fis-105	81	1	their	their	PRON
fis-105	81	2	pr	pr	NOUN
fis-105	81	3	he	he	PRON
fis-105	81	4	low	low	ADV
fis-105	81	5	pressu	pressu	PROPN
fis-105	81	6	eionised	eionise	VERB
fis-105	81	7	wate	wate	NOUN
fis-105	81	8	they	they	PRON
fis-105	81	9	have	have	VERB
fis-105	81	10	to	to	ADP
fis-105	81	11	b	b	NOUN
fis-105	81	12	wo	will	AUX
fis-105	81	13	studs	stud	NOUN
fis-105	81	14	are	be	AUX
fis-105	81	15	be	be	AUX
fis-105	81	16	preloaded	preloade	VERB
fis-105	81	17	on	on	ADP
fis-105	81	18	.	.	PUNCT
fis-105	82	1	for	for	ADP
fis-105	82	2	diffe	diffe	ADJ
fis-105	82	3	(	(	PUNCT
fis-105	82	4	2	2	NUM
fis-105	82	5	)	)	PUNCT
fis-105	82	6	(	(	PUNCT
fis-105	82	7	3	3	X
fis-105	82	8	)	)	PUNCT
fis-105	82	9	ratio	ratio	NOUN
fis-105	82	10			NOUN
fis-105	82	11	of	of	ADP
fis-105	82	12	sili	sili	NOUN
fis-105	82	13	(	(	PUNCT
fis-105	82	14	4	4	NUM
fis-105	82	15	)	)	PUNCT
fis-105	82	16	(	(	PUNCT
fis-105	82	17	5	5	NUM
fis-105	82	18	)	)	PUNCT
fis-105	82	19	s	s	VERB
fis-105	82	20	to	to	ADP
fis-105	82	21	the	the	DET
fis-105	82	22	frac	frac	PROPN
fis-105	82	23	measured	measure	VERB
fis-105	82	24	durin	durin	NOUN
fis-105	82	25	reparation	reparation	NOUN
fis-105	82	26	can	can	AUX
fis-105	82	27	ure	ure	VERB
fis-105	82	28	plasma	plasma	NOUN
fis-105	82	29	.	.	PUNCT
fis-105	83	1	t	t	PROPN
fis-105	83	2	er	er	INTJ
fis-105	83	3	.	.	PUNCT
fis-105	84	1	the	the	DET
fis-105	84	2	wafers	wafer	NOUN
fis-105	84	3	be	be	AUX
fis-105	84	4	annealed	anneal	VERB
fis-105	84	5	f	f	X
fis-105	84	6	glued	glue	VERB
fis-105	84	7	on	on	ADP
fis-105	84	8	the	the	DET
fis-105	84	9	.	.	PUNCT
fis-105	84	10	erent	erent	PROPN
fis-105	84	11	icon	icon	PROPN
fis-105	84	12	cture	cture	PROPN
fis-105	84	13	ng	ng	PROPN
fis-105	84	14	a	a	DET
fis-105	84	15	n	n	NOUN
fis-105	84	16	be	be	VERB
fis-105	84	17	then	then	ADV
fis-105	84	18	s	s	VERB
fis-105	84	19	are	be	AUX
fis-105	84	20	for	for	ADP
fis-105	84	21	6	6	NUM
fis-105	84	22	top	top	ADJ
fis-105	84	23	http://dx.medra.org/10.3221/igf-esis.15.03&auth=true	http://dx.medra.org/10.3221/igf-esis.15.03&auth=true	ADJ
fis-105	84	24	http://www.gruppofrattura.it	http://www.gruppofrattura.it	X
fis-105	84	25	th	th	X
fis-105	84	26	for	for	ADP
fis-105	84	27	tow	tow	NOUN
fis-105	84	28	pro	pro	X
fis-105	84	29	th	th	X
fis-105	84	30	trea	trea	PROPN
fis-105	84	31	150	150	NUM
fis-105	84	32	an	an	DET
fis-105	84	33	fur	fur	NOUN
fis-105	84	34	the	the	DET
fis-105	84	35	he	he	PRON
fis-105	84	36	experiment	experiment	NOUN
fis-105	84	37	rces	rce	NOUN
fis-105	84	38	subjected	subject	VERB
fis-105	84	39	ward	ward	NOUN
fis-105	84	40	the	the	DET
fis-105	84	41	max	max	PROPN
fis-105	84	42	opagation	opagation	PROPN
fis-105	84	43	bec	bec	PROPN
fis-105	84	44	he	he	PRON
fis-105	84	45	first	first	PROPN
fis-105	84	46	series	series	PROPN
fis-105	84	47	atment	atment	PROPN
fis-105	84	48	.	.	PUNCT
fis-105	85	1	in	in	ADP
fis-105	85	2	th	th	X
fis-105	85	3	0	0	NUM
fis-105	85	4	°	°	ADP
fis-105	85	5	c	c	NOUN
fis-105	85	6	,	,	PUNCT
fis-105	85	7	fig	fig	NOUN
fis-105	85	8	.	.	PUNCT
fis-105	86	1	5	5	NUM
fis-105	86	2	.	.	X
fis-105	86	3	n	n	PRON
fis-105	86	4	increase	increase	NOUN
fis-105	86	5	of	of	ADP
fis-105	86	6	rther	rther	NOUN
fis-105	86	7	pre	pre	ADJ
fis-105	86	8	-	-	VERB
fis-105	86	9	treat	treat	ADJ
fis-105	86	10	e	e	NOUN
fis-105	86	11	one	one	NUM
fis-105	86	12	for	for	ADP
fis-105	86	13	anne	anne	PROPN
fis-105	86	14	t	t	PROPN
fis-105	86	15	is	be	AUX
fis-105	86	16	carried	carry	VERB
fis-105	87	1	ou	ou	ADP
fis-105	87	2	d	d	X
fis-105	87	3	to	to	ADP
fis-105	87	4	the	the	DET
fis-105	87	5	applie	applie	PROPN
fis-105	87	6	ximum	ximum	PROPN
fis-105	87	7	force	force	NOUN
fis-105	87	8	comes	come	VERB
fis-105	87	9	instabl	instabl	PROPN
fis-105	87	10	f	f	PROPN
fis-105	87	11	s	s	PROPN
fis-105	87	12	of	of	ADP
fis-105	87	13	experim	experim	NOUN
fis-105	87	14	hat	hat	NOUN
fis-105	87	15	case	case	NOUN
fis-105	87	16	,	,	PUNCT
fis-105	87	17	no	no	DET
fis-105	87	18	p	p	NOUN
fis-105	87	19	m	m	NOUN
fis-105	87	20	ea	ea	X
fis-105	87	21	su	su	PROPN
fis-105	88	1	re	re	PROPN
fis-105	88	2	d	d	PROPN
fis-105	88	3	fo	fo	ADP
fis-105	88	4	rc	rc	PROPN
fis-105	88	5	e	e	PROPN
fis-105	88	6	[	[	X
fis-105	88	7	n	n	X
fis-105	88	8	]	]	PUNCT
fis-105	88	9	figure	figure	NOUN
fis-105	88	10	5	5	NUM
fis-105	88	11	:	:	PUNCT
fis-105	88	12	the	the	DET
fis-105	88	13	annealing	anneal	VERB
fis-105	88	14	tment	tment	NOUN
fis-105	88	15	and	and	CCONJ
fis-105	88	16	an	an	DET
fis-105	88	17	ealing	ealing	PROPN
fis-105	88	18	temper	temper	PROPN
fis-105	88	19	ut	ut	PROPN
fis-105	88	20	displaceme	displaceme	PROPN
fis-105	88	21	ed	ed	PROPN
fis-105	88	22	deflection	deflection	PROPN
fis-105	88	23	fmax	fmax	PROPN
fis-105	88	24	before	before	ADP
fis-105	88	25	le	le	PROPN
fis-105	88	26	and	and	CCONJ
fis-105	88	27	the	the	DET
fis-105	88	28	spe	spe	ADJ
fis-105	88	29	figure	figure	NOUN
fis-105	88	30	4	4	NUM
fis-105	88	31	:	:	PUNCT
fis-105	88	32	exper	exper	NOUN
fis-105	88	33	ments	ment	NOUN
fis-105	88	34	focus	focus	VERB
fis-105	88	35	o	o	NOUN
fis-105	88	36	plasma	plasma	NOUN
fis-105	88	37	activat	activat	ADV
fis-105	88	38	0.00	0.00	NUM
fis-105	88	39	0.0	0.0	NUM
fis-105	88	40	0.3	0.3	NUM
fis-105	88	41	0.6	0.6	NUM
fis-105	88	42	0.9	0.9	NUM
fis-105	88	43	1.2	1.2	NUM
fis-105	88	44	1.5	1.5	NUM
fis-105	88	45	1.8	1.8	NUM
fis-105	88	46	m	m	NOUN
fis-105	88	47	ea	ea	NOUN
fis-105	88	48	su	su	PROPN
fis-105	88	49	re	re	PROPN
fis-105	88	50	d	d	PROPN
fis-105	88	51	fo	fo	ADP
fis-105	88	52	rc	rc	PROPN
fis-105	88	53	e	e	PROPN
fis-105	88	54	[	[	X
fis-105	88	55	n	n	X
fis-105	88	56	]	]	PUNCT
fis-105	88	57	force	force	NOUN
fis-105	88	58	displace	displace	NOUN
fis-105	88	59	g	g	NOUN
fis-105	88	60	temperature	temperature	NOUN
fis-105	88	61	n	n	NOUN
fis-105	88	62	annealing	anneal	VERB
fis-105	88	63	te	te	ADP
fis-105	88	64	ratures	rature	NOUN
fis-105	88	65	of	of	ADP
fis-105	88	66	onl	onl	PROPN
fis-105	88	67	k.	k.	PROPN
fis-105	88	68	vogel	vogel	PROPN
fis-105	88	69	et	et	PROPN
fis-105	88	70	ent	ent	PROPN
fis-105	88	71	controlled	control	VERB
fis-105	88	72	.	.	PUNCT
fis-105	89	1	when	when	SCONJ
fis-105	89	2	the	the	DET
fis-105	89	3	c	c	NOUN
fis-105	89	4	e	e	VERB
fis-105	89	5	decreasing	decrease	VERB
fis-105	89	6	a	a	DET
fis-105	89	7	ecimen	eciman	NOUN
fis-105	89	8	fails	fail	VERB
fis-105	89	9	.	.	PUNCT
fis-105	90	1	t	t	PROPN
fis-105	90	2	rimental	rimental	PROPN
fis-105	90	3	setup	setup	NOUN
fis-105	90	4	on	on	ADP
fis-105	90	5	the	the	DET
fis-105	90	6	heat	heat	NOUN
fis-105	90	7	tion	tion	NOUN
fis-105	90	8	has	have	AUX
fis-105	90	9	been	be	AUX
fis-105	90	10	0.01	0.01	NUM
fis-105	90	11	0.02	0.02	NUM
fis-105	90	12	ap	ap	PROPN
fis-105	90	13	ement	ement	NOUN
fis-105	90	14	curves	curve	NOUN
fis-105	90	15	fo	fo	SCONJ
fis-105	90	16	e	e	NOUN
fis-105	90	17	leads	lead	VERB
fis-105	90	18	to	to	ADP
fis-105	90	19	an	an	DET
fis-105	90	20	emperature	emperature	NOUN
fis-105	90	21	o	o	NOUN
fis-105	90	22	ly	ly	ADP
fis-105	90	23	40	40	NUM
fis-105	91	1	°	°	NOUN
fis-105	91	2	c	c	X
fis-105	91	3	.	.	PUNCT
fis-105	92	1	alii	alii	PROPN
fis-105	92	2	,	,	PUNCT
fis-105	92	3	frattura	frattura	PROPN
fis-105	92	4	ed	ed	PROPN
fis-105	92	5	d.	d.	PROPN
fis-105	92	6	therefore	therefore	ADV
fis-105	92	7	rack	rack	VERB
fis-105	92	8	length	length	NOUN
fis-105	92	9	a	a	DET
fis-105	92	10	again	again	ADV
fis-105	92	11	.	.	PUNCT
fis-105	93	1	when	when	SCONJ
fis-105	93	2	the	the	DET
fis-105	93	3	measured	measure	VERB
fis-105	93	4	for	for	ADP
fis-105	93	5	the	the	DET
fis-105	93	6	measu	measu	ADJ
fis-105	93	7	treatment	treatment	NOUN
fis-105	93	8	of	of	ADP
fis-105	93	9	n	n	NUM
fis-105	93	10	carried	carry	VERB
fis-105	93	11	out	out	ADP
fis-105	93	12	.	.	PUNCT
fis-105	94	1	2	2	NUM
fis-105	94	2	0.03	0.03	NUM
fis-105	94	3	pplied	pplie	VERB
fis-105	94	4	displace	displace	NOUN
fis-105	94	5	for	for	ADP
fis-105	94	6	different	different	ADJ
fis-105	94	7	he	he	PRON
fis-105	94	8	n	n	PRON
fis-105	94	9	increase	increase	VERB
fis-105	94	10	of	of	ADP
fis-105	94	11	of	of	ADP
fis-105	94	12	150	150	NUM
fis-105	94	13	°	°	NOUN
fis-105	94	14	c	c	NOUN
fis-105	94	15	,	,	PUNCT
fis-105	94	16	the	the	DET
fis-105	94	17	d	d	PROPN
fis-105	94	18	integrità	integrità	PROPN
fis-105	94	19	struttu	struttu	NOUN
fis-105	94	20	a	a	DET
fis-105	94	21	micro	micro	NOUN
fis-105	94	22	-	-	NOUN
fis-105	94	23	chev	chev	VERB
fis-105	94	24	a	a	DET
fis-105	94	25	reaches	reach	VERB
fis-105	94	26	its	its	PRON
fis-105	94	27	c	c	NOUN
fis-105	94	28	the	the	DET
fis-105	94	29	crack	crack	NOUN
fis-105	94	30	len	len	NOUN
fis-105	94	31	d	d	PROPN
fis-105	94	32	force	force	NOUN
fis-105	94	33	becom	becom	VERB
fis-105	94	34	rement	rement	NOUN
fis-105	94	35	of	of	ADP
fis-105	94	36	the	the	DET
fis-105	94	37	f	f	PROPN
fis-105	94	38	the	the	DET
fis-105	94	39	specime	specime	VERB
fis-105	94	40	their	their	PRON
fis-105	94	41	anneal	anneal	ADJ
fis-105	94	42	0.04	0.04	NUM
fis-105	94	43	0.05	0.05	NUM
fis-105	94	44	ement	ement	NOUN
fis-105	94	45	[	[	X
fis-105	94	46	mm	mm	X
fis-105	94	47	]	]	X
fis-105	94	48	eat	eat	NOUN
fis-105	94	49	treatments	treatment	NOUN
fis-105	94	50	the	the	DET
fis-105	94	51	measured	measure	VERB
fis-105	94	52	e	e	NOUN
fis-105	94	53	measured	measure	VERB
fis-105	94	54	m	m	NOUN
fis-105	94	55	turale	turale	NOUN
fis-105	94	56	,	,	PUNCT
fis-105	94	57	15	15	NUM
fis-105	94	58	(	(	PUNCT
fis-105	94	59	2011	2011	NUM
fis-105	94	60	)	)	PUNCT
fis-105	94	61	vron	vron	NOUN
fis-105	94	62	-	-	PUNCT
fis-105	94	63	tester	tester	NOUN
fis-105	94	64	is	be	AUX
fis-105	94	65	ritical	ritical	ADJ
fis-105	94	66	value	value	NOUN
fis-105	94	67	,	,	PUNCT
fis-105	94	68	t	t	PROPN
fis-105	94	69	ngth	ngth	NOUN
fis-105	94	70	exceeds	exceed	VERB
fis-105	94	71	mes	me	NOUN
fis-105	94	72	almost	almost	ADV
fis-105	94	73	ze	ze	PROPN
fis-105	94	74	maximum	maximum	ADJ
fis-105	94	75	forc	forc	NOUN
fis-105	94	76	ens	ens	PROPN
fis-105	94	77	.	.	PUNCT
fis-105	95	1	all	all	DET
fis-105	95	2	spec	spec	VERB
fis-105	95	3	ling	ling	PROPN
fis-105	95	4	temperat	temperat	PROPN
fis-105	95	5	0.06	0.06	NUM
fis-105	95	6	0	0	NUM
fis-105	95	7	40	40	NUM
fis-105	95	8	°	°	PROPN
fis-105	95	9	c	c	NOUN
fis-105	95	10	100	100	NUM
fis-105	95	11	°	°	NOUN
fis-105	95	12	c	c	NOUN
fis-105	95	13	150	150	NUM
fis-105	95	14	°	°	NOUN
fis-105	95	15	c	c	NOUN
fis-105	95	16	(	(	PUNCT
fis-105	95	17	annealing	anneal	VERB
fis-105	95	18	tem	tem	PROPN
fis-105	95	19	d	d	PROPN
fis-105	95	20	maximum	maximum	PROPN
fis-105	95	21	f	f	X
fis-105	95	22	maximum	maximum	NOUN
fis-105	95	23	for	for	ADP
fis-105	95	24	)	)	PUNCT
fis-105	95	25	21	21	NUM
fis-105	95	26	-	-	SYM
fis-105	95	27	28	28	NUM
fis-105	95	28	;	;	PUNCT
fis-105	95	29	doi	doi	NOUN
fis-105	95	30	:	:	PUNCT
fis-105	95	31	10	10	NUM
fis-105	95	32	used	use	VERB
fis-105	95	33	to	to	PART
fis-105	95	34	mea	mea	VERB
fis-105	95	35	the	the	DET
fis-105	95	36	measured	measured	ADJ
fis-105	95	37	the	the	DET
fis-105	95	38	value	value	NOUN
fis-105	95	39	a1	a1	NOUN
fis-105	95	40	ero	ero	PROPN
fis-105	95	41	again	again	ADV
fis-105	95	42	.	.	PUNCT
fis-105	96	1	ce	ce	PROPN
fis-105	96	2	.	.	PROPN
fis-105	96	3	cimens	cimens	PROPN
fis-105	96	4	have	have	VERB
fis-105	96	5	tures	ture	NOUN
fis-105	96	6	vary	vary	AUX
fis-105	96	7	bet	bet	VERB
fis-105	96	8	0.07	0.07	NUM
fis-105	96	9	mperatures	mperature	NOUN
fis-105	96	10	)	)	PUNCT
fis-105	96	11	.	.	PUNCT
fis-105	97	1	force	force	NOUN
fis-105	97	2	.	.	PUNCT
fis-105	98	1	for	for	ADP
fis-105	98	2	sp	sp	ADP
fis-105	98	3	rce	rce	NOUN
fis-105	98	4	is	be	AUX
fis-105	98	5	about	about	ADV
fis-105	98	6	3	3	NUM
fis-105	98	7	0.3221	0.3221	NUM
fis-105	98	8	/	/	SYM
fis-105	98	9	igf	igf	NOUN
fis-105	98	10	-	-	NOUN
fis-105	98	11	esis	esis	NOUN
fis-105	98	12	.	.	PUNCT
fis-105	99	1	asure	asure	VERB
fis-105	99	2	the	the	DET
fis-105	99	3	reac	reac	NOUN
fis-105	99	4	d	d	PROPN
fis-105	99	5	force	force	NOUN
fis-105	99	6	conve	conve	VERB
fis-105	99	7	1	1	NUM
fis-105	99	8	the	the	DET
fis-105	99	9	stable	stable	ADJ
fis-105	99	10	c	c	NOUN
fis-105	100	1	no	no	DET
fis-105	100	2	further	further	ADJ
fis-105	100	3	tween	tween	NOUN
fis-105	100	4	40	40	NUM
fis-105	100	5	°	°	NOUN
fis-105	100	6	c	c	NOUN
fis-105	100	7	pecimens	pecimen	NOUN
fis-105	100	8	with	with	ADP
fis-105	100	9	35	35	NUM
fis-105	100	10	%	%	NOUN
fis-105	100	11	higher	high	ADJ
fis-105	100	12	t	t	PROPN
fis-105	100	13	15.03	15.03	NUM
fis-105	100	14	25	25	NUM
fis-105	100	15	ction	ction	NOUN
fis-105	100	16	erges	erge	NOUN
fis-105	100	17	rack	rack	VERB
fis-105	100	18	preand	preand	NOUN
fis-105	101	1	h	h	NOUN
fis-105	101	2	no	no	INTJ
fis-105	101	3	than	than	ADP
fis-105	101	4	http://dx.medra.org/10.3221/igf-esis.15.03&auth=true	http://dx.medra.org/10.3221/igf-esis.15.03&auth=true	PROPN
fis-105	101	5	http://www.gruppofrattura.it	http://www.gruppofrattura.it	PROPN
fis-105	102	1	k.	k.	PROPN
fis-105	102	2	v	v	ADP
fis-105	102	3	26	26	NUM
fis-105	102	4	in	in	ADV
fis-105	102	5	in	in	ADP
fis-105	102	6	dur	dur	PROPN
fis-105	102	7	ref	ref	NOUN
fis-105	102	8	pla	pla	PROPN
fis-105	102	9	five	five	NUM
fis-105	102	10	sam	sam	PROPN
fis-105	102	11	for	for	ADP
fis-105	102	12	wit	wit	NOUN
fis-105	102	13	for	for	ADP
fis-105	102	14	re	re	PROPN
fis-105	102	15	wa	wa	PROPN
fis-105	102	16	neg	neg	PROPN
fis-105	102	17	th	th	X
fis-105	102	18	coe	coe	PROPN
fis-105	102	19	bas	bas	PROPN
fis-105	102	20	the	the	DET
fis-105	102	21	par	par	NOUN
fis-105	102	22	a	a	DET
fis-105	102	23	h	h	NOUN
fis-105	103	1	me	i	PRON
fis-105	103	2	sur	sur	PROPN
fis-105	103	3	ap	ap	PROPN
fis-105	103	4	spe	spe	PROPN
fis-105	103	5	act	act	PROPN
fis-105	103	6	sam	sam	PROPN
fis-105	103	7	tem	tem	PROPN
fis-105	103	8	t	t	PROPN
fis-105	103	9	vogel	vogel	PROPN
fis-105	103	10	et	et	PROPN
fis-105	103	11	alii	alii	PROPN
fis-105	103	12	,	,	PUNCT
fis-105	103	13	fra	fra	NOUN
fis-105	103	14	addition	addition	NOUN
fis-105	103	15	to	to	ADP
fis-105	103	16	th	th	PRON
fis-105	103	17	the	the	DET
fis-105	103	18	introduct	introduct	NOUN
fis-105	103	19	ration	ration	NOUN
fis-105	103	20	of	of	ADP
fis-105	103	21	the	the	DET
fis-105	103	22	ference	ference	NOUN
fis-105	103	23	specim	specim	PROPN
fis-105	103	24	asma	asma	PROPN
fis-105	103	25	(	(	PUNCT
fis-105	103	26	n2	n2	ADJ
fis-105	103	27	-	-	ADJ
fis-105	103	28	plas	plas	ADJ
fis-105	103	29	e	e	NOUN
fis-105	103	30	minutes	minute	NOUN
fis-105	103	31	.	.	PUNCT
fis-105	104	1	th	th	PROPN
fis-105	104	2	mples	mple	NOUN
fis-105	104	3	vary	vary	VERB
fis-105	104	4	be	be	VERB
fis-105	104	5	r	r	NOUN
fis-105	104	6	specimens	specimen	NOUN
fis-105	104	7	w	w	AUX
fis-105	104	8	thout	thout	PROPN
fis-105	104	9	any	any	DET
fis-105	104	10	pla	pla	NOUN
fis-105	104	11	r	r	NOUN
fis-105	104	12	oxygen	oxygen	NOUN
fis-105	104	13	plasm	plasm	NOUN
fis-105	104	14	esults	esult	NOUN
fis-105	104	15	he	he	PRON
fis-105	104	16	varia	varia	VERB
fis-105	104	17	therefor	therefor	ADP
fis-105	104	18	by	by	ADP
fis-105	104	19	keep	keep	VERB
fis-105	104	20	fers	fer	NOUN
fis-105	104	21	(	(	PUNCT
fis-105	104	22	si	si	NOUN
fis-105	104	23	-	-	PUNCT
fis-105	104	24	si	si	X
fis-105	104	25	geo	geo	PROPN
fis-105	104	26	gligible	gligible	PROPN
fis-105	104	27	variati	variati	PROPN
fis-105	104	28	he	he	PRON
fis-105	104	29	variation	variation	NOUN
fis-105	104	30	of	of	ADP
fis-105	104	31	efficients	efficient	NOUN
fis-105	104	32	.	.	PUNCT
fis-105	105	1	so	so	ADV
fis-105	105	2	sed	se	VERB
fis-105	105	3	on	on	ADP
fis-105	105	4	the	the	DET
fis-105	105	5	ge	ge	PROPN
fis-105	105	6	e	e	PROPN
fis-105	105	7	fracture	fracture	PROPN
fis-105	105	8	tou	tou	PROPN
fis-105	105	9	rameters	rameter	NOUN
fis-105	105	10	of	of	ADP
fis-105	105	11	th	th	NUM
fis-105	105	12	heat	heat	NOUN
fis-105	105	13	treatmen	treatman	NOUN
fis-105	105	14	easured	easure	VERB
fis-105	105	15	maxim	maxim	NOUN
fis-105	105	16	rfaces	rface	NOUN
fis-105	105	17	of	of	ADP
fis-105	105	18	the	the	DET
fis-105	105	19	w	w	NOUN
fis-105	105	20	pplying	pplying	NOUN
fis-105	105	21	the	the	DET
fis-105	105	22	sa	sa	PROPN
fis-105	105	23	ecimens	ecimen	NOUN
fis-105	105	24	is	be	AUX
fis-105	105	25	hig	hig	NOUN
fis-105	105	26	tivated	tivate	VERB
fis-105	105	27	specim	specim	NOUN
fis-105	105	28	mples	mple	NOUN
fis-105	105	29	with	with	ADP
fis-105	105	30	an	an	DET
fis-105	105	31	mperatures	mperature	NOUN
fis-105	105	32	.	.	PUNCT
fis-105	106	1	t	t	PROPN
fis-105	106	2	attura	attura	PROPN
fis-105	106	3	ed	ed	PROPN
fis-105	106	4	integrit	integrit	PROPN
fis-105	106	5	he	he	PRON
fis-105	106	6	heat	heat	VERB
fis-105	106	7	treatm	treatm	PROPN
fis-105	106	8	tion	tion	NOUN
fis-105	106	9	,	,	PUNCT
fis-105	106	10	the	the	DET
fis-105	106	11	surf	surf	NOUN
fis-105	106	12	plasma	plasma	NOUN
fis-105	106	13	treat	treat	VERB
fis-105	106	14	mens	men	NOUN
fis-105	106	15	have	have	AUX
fis-105	106	16	n	n	PRON
fis-105	106	17	sma	sma	VERB
fis-105	106	18	)	)	PUNCT
fis-105	106	19	have	have	VERB
fis-105	106	20	bee	bee	NOUN
fis-105	106	21	he	he	PRON
fis-105	106	22	annealing	anneal	VERB
fis-105	106	23	etween	etween	VERB
fis-105	106	24	1.38	1.38	NUM
fis-105	106	25	n	n	NUM
fis-105	106	26	m	m	PROPN
fis-105	106	27	ea	ea	NOUN
fis-105	106	28	su	su	PROPN
fis-105	107	1	re	re	PROPN
fis-105	107	2	d	d	PROPN
fis-105	107	3	fo	fo	ADP
fis-105	107	4	rc	rc	PROPN
fis-105	107	5	e	e	PROPN
fis-105	108	1	[	[	X
fis-105	108	2	n	n	X
fis-105	108	3	]	]	PUNCT
fis-105	108	4	with	with	ADP
fis-105	108	5	plasma	plasma	NOUN
fis-105	108	6	a	a	DET
fis-105	108	7	asma	asma	PROPN
fis-105	108	8	activatio	activatio	PROPN
fis-105	108	9	ma	ma	PROPN
fis-105	108	10	.	.	PROPN
fis-105	108	11	ation	ation	PROPN
fis-105	108	12	of	of	ADP
fis-105	108	13	geom	geom	PROPN
fis-105	108	14	re	re	ADP
fis-105	108	15	to	to	ADP
fis-105	108	16	different	different	ADJ
fis-105	108	17	ping	ping	NOUN
fis-105	108	18	the	the	DET
fis-105	108	19	struc	struc	PROPN
fis-105	108	20	ometry	ometry	NOUN
fis-105	108	21	2	2	NUM
fis-105	108	22	)	)	PUNCT
fis-105	108	23	ins	in	NOUN
fis-105	108	24	ion	ion	NOUN
fis-105	108	25	of	of	ADP
fis-105	108	26	y(	y(	NOUN
fis-105	108	27	)	)	PUNCT
fis-105	109	1	c	c	PROPN
fis-105	109	2	f	f	PROPN
fis-105	110	1	the	the	DET
fis-105	110	2	wafer	wafer	NOUN
fis-105	110	3	h	h	NOUN
fis-105	110	4	the	the	DET
fis-105	110	5	values	value	NOUN
fis-105	110	6	of	of	ADP
fis-105	110	7	eometry	eometry	NOUN
fis-105	110	8	,	,	PUNCT
fis-105	110	9	the	the	DET
fis-105	110	10	m	m	PROPN
fis-105	110	11	ughness	ughness	ADJ
fis-105	110	12	can	can	AUX
fis-105	110	13	he	he	PRON
fis-105	110	14	manufactu	manufactu	VERB
fis-105	110	15	nt	not	PART
fis-105	110	16	at	at	ADP
fis-105	110	17	higher	high	ADJ
fis-105	110	18	t	t	PROPN
fis-105	110	19	mum	mum	NOUN
fis-105	110	20	force	force	VERB
fis-105	110	21	a	a	DET
fis-105	110	22	wafers	wafer	NOUN
fis-105	110	23	,	,	PUNCT
fis-105	110	24	either	either	CCONJ
fis-105	110	25	ame	ame	PROPN
fis-105	110	26	annealing	anneal	VERB
fis-105	110	27	gher	gher	NOUN
fis-105	110	28	than	than	SCONJ
fis-105	110	29	the	the	DET
fis-105	110	30	mens	men	NOUN
fis-105	110	31	varies	vary	VERB
fis-105	110	32	fo	fo	ADP
fis-105	110	33	n	n	PRON
fis-105	110	34	annealing	anneal	VERB
fis-105	110	35	tà	tà	PRON
fis-105	110	36	strutturale	strutturale	NOUN
fis-105	110	37	,	,	PUNCT
fis-105	110	38	15	15	NUM
fis-105	110	39	ment	ment	NOUN
fis-105	110	40	,	,	PUNCT
fis-105	110	41	the	the	DET
fis-105	110	42	infl	infl	PROPN
fis-105	110	43	face	face	NOUN
fis-105	110	44	activatio	activatio	ADV
fis-105	110	45	tment	tment	ADJ
fis-105	110	46	can	can	AUX
fis-105	110	47	als	als	VERB
fis-105	110	48	no	no	DET
fis-105	110	49	plasma	plasma	NOUN
fis-105	110	50	ac	ac	NOUN
fis-105	110	51	en	en	ADV
fis-105	110	52	taken	take	VERB
fis-105	110	53	into	into	ADP
fis-105	110	54	temperature	temperature	NOUN
fis-105	110	55	n	n	NOUN
fis-105	110	56	and	and	CCONJ
fis-105	110	57	4.26	4.26	NUM
fis-105	110	58	n	n	CCONJ
fis-105	110	59	,	,	PUNCT
fis-105	110	60	0.00	0.00	NUM
fis-105	110	61	0	0	NUM
fis-105	110	62	0	0	NUM
fis-105	110	63	1	1	NUM
fis-105	110	64	2	2	NUM
fis-105	110	65	3	3	NUM
fis-105	110	66	4	4	NUM
fis-105	110	67	5	5	NUM
fis-105	110	68	figure	figure	NOUN
fis-105	110	69	6	6	NUM
fis-105	110	70	:	:	PUNCT
fis-105	110	71	f	f	X
fis-105	110	72	activation	activation	NOUN
fis-105	110	73	,	,	PUNCT
fis-105	110	74	th	th	X
fis-105	110	75	on	on	ADP
fis-105	110	76	.	.	PUNCT
fis-105	111	1	the	the	DET
fis-105	111	2	maxim	maxim	NOUN
fis-105	111	3	metries	metrie	NOUN
fis-105	111	4	and	and	CCONJ
fis-105	111	5	bo	bo	PROPN
fis-105	111	6	t	t	PROPN
fis-105	111	7	fracture	fracture	PROPN
fis-105	111	8	tou	tou	PROPN
fis-105	111	9	cture	cture	PROPN
fis-105	111	10	height	height	NOUN
fis-105	111	11	h	h	NOUN
fis-105	111	12	tead	tead	NOUN
fis-105	111	13	of	of	ADP
fis-105	111	14	a	a	DET
fis-105	111	15	sam	sam	PROPN
fis-105	111	16	can	can	AUX
fis-105	111	17	be	be	AUX
fis-105	111	18	observ	observ	ADJ
fis-105	111	19	height	height	NOUN
fis-105	111	20	leads	lead	VERB
fis-105	111	21	to	to	ADP
fis-105	111	22	f	f	PROPN
fis-105	111	23	y(	y(	PROPN
fis-105	111	24	)	)	PUNCT
fis-105	112	1	decreas	decrea	NOUN
fis-105	112	2	minima	minima	ADJ
fis-105	112	3	of	of	ADP
fis-105	112	4	the	the	DET
fis-105	112	5	be	be	AUX
fis-105	112	6	determin	determin	NOUN
fis-105	112	7	uring	ure	VERB
fis-105	112	8	process	process	NOUN
fis-105	112	9	.	.	PUNCT
fis-105	113	1	temperatures	temperature	NOUN
fis-105	113	2	and	and	CCONJ
fis-105	113	3	the	the	DET
fis-105	113	4	fractu	fractu	ADJ
fis-105	113	5	r	r	NOUN
fis-105	113	6	in	in	ADP
fis-105	113	7	oxygen	oxygen	NOUN
fis-105	113	8	or	or	CCONJ
fis-105	113	9	g	g	NOUN
fis-105	113	10	temperature	temperature	NOUN
fis-105	113	11	e	e	NOUN
fis-105	113	12	one	one	NUM
fis-105	113	13	of	of	ADP
fis-105	113	14	sam	sam	PROPN
fis-105	113	15	or	or	CCONJ
fis-105	113	16	different	different	ADJ
fis-105	113	17	a	a	DET
fis-105	113	18	temperature	temperature	NOUN
fis-105	113	19	5	5	NUM
fis-105	113	20	(	(	PUNCT
fis-105	113	21	2011	2011	NUM
fis-105	113	22	)	)	PUNCT
fis-105	113	23	21	21	NUM
fis-105	113	24	-	-	SYM
fis-105	113	25	28	28	NUM
fis-105	113	26	;	;	PUNCT
fis-105	113	27	luence	luence	NOUN
fis-105	113	28	of	of	ADP
fis-105	113	29	the	the	DET
fis-105	113	30	on	on	NOUN
fis-105	113	31	can	can	AUX
fis-105	113	32	be	be	AUX
fis-105	113	33	car	car	NOUN
fis-105	113	34	so	so	ADV
fis-105	113	35	vary	vary	VERB
fis-105	113	36	.	.	PUNCT
fis-105	114	1	thre	thre	NOUN
fis-105	114	2	ctivation	ctivation	NOUN
fis-105	114	3	.	.	PUNCT
fis-105	115	1	mo	mo	PROPN
fis-105	115	2	account	account	PROPN
fis-105	115	3	.	.	PUNCT
fis-105	116	1	the	the	PRON
fis-105	116	2	of	of	ADP
fis-105	116	3	100	100	NUM
fis-105	116	4	°	°	NOUN
fis-105	116	5	c	c	PROPN
fis-105	116	6	w	w	PROPN
fis-105	116	7	,	,	PUNCT
fis-105	116	8	fig	fig	NOUN
fis-105	116	9	.	.	PUNCT
fis-105	117	1	6	6	NUM
fis-105	117	2	.	.	NOUN
fis-105	117	3	0.02	0.02	NUM
fis-105	117	4	0.04	0.04	NUM
fis-105	117	5	applie	applie	PROPN
fis-105	117	6	force	force	PROPN
fis-105	117	7	displacem	displacem	PROPN
fis-105	117	8	e	e	PROPN
fis-105	117	9	measured	measure	VERB
fis-105	117	10	m	m	VERB
fis-105	117	11	mum	mum	NOUN
fis-105	117	12	forces	force	NOUN
fis-105	117	13	ond	ond	VERB
fis-105	117	14	paramete	paramete	ADJ
fis-105	117	15	ughness	ughness	ADJ
fis-105	117	16	.	.	PUNCT
fis-105	118	1	hs	hs	PROPN
fis-105	118	2	constant	constant	PROPN
fis-105	118	3	,	,	PUNCT
fis-105	118	4	a	a	DET
fis-105	118	5	mple	mple	ADJ
fis-105	118	6	consistin	consistin	NOUN
fis-105	118	7	ved	ve	VERB
fis-105	118	8	,	,	PUNCT
fis-105	118	9	fig	fig	NOUN
fis-105	118	10	.	.	PUNCT
fis-105	119	1	7	7	NUM
fis-105	119	2	.	.	NUM
fis-105	119	3	o	o	X
fis-105	119	4	a	a	DET
fis-105	119	5	significant	significant	ADJ
fis-105	119	6	se	se	NOUN
fis-105	119	7	with	with	ADP
fis-105	119	8	increa	increa	PROPN
fis-105	119	9	e	e	PROPN
fis-105	119	10	stress	stress	NOUN
fis-105	119	11	inten	inten	VERB
fis-105	119	12	ned	ne	VERB
fis-105	119	13	.	.	PUNCT
fis-105	120	1	using	use	VERB
fis-105	120	2	th	th	X
fis-105	120	3	.	.	PUNCT
fis-105	121	1	smaller	small	ADJ
fis-105	121	2	frac	frac	PROPN
fis-105	121	3	leads	lead	VERB
fis-105	121	4	to	to	ADP
fis-105	121	5	hig	hig	NOUN
fis-105	121	6	ure	ure	VERB
fis-105	121	7	toughnes	toughne	NOUN
fis-105	121	8	r	r	NOUN
fis-105	121	9	nitrogen	nitrogen	NOUN
fis-105	121	10	pla	pla	PROPN
fis-105	121	11	e	e	PROPN
fis-105	121	12	,	,	PUNCT
fis-105	121	13	the	the	DET
fis-105	121	14	maxim	maxim	NOUN
fis-105	121	15	mples	mple	VERB
fis-105	121	16	with	with	ADP
fis-105	121	17	any	any	DET
fis-105	121	18	annealing	anneal	VERB
fis-105	121	19	tem	tem	NOUN
fis-105	121	20	of	of	ADP
fis-105	121	21	40	40	NUM
fis-105	121	22	°	°	NOUN
fis-105	121	23	c	c	NOUN
fis-105	121	24	is	be	AUX
fis-105	121	25	;	;	PUNCT
fis-105	121	26	doi	doi	NOUN
fis-105	121	27	:	:	PUNCT
fis-105	121	28	10.3221	10.3221	NUM
fis-105	121	29	/	/	SYM
fis-105	121	30	ig	ig	PROPN
fis-105	121	31	pre	pre	NOUN
fis-105	121	32	-	-	NOUN
fis-105	121	33	treatmen	treatman	NOUN
fis-105	121	34	rried	rrie	VERB
fis-105	121	35	out	out	ADP
fis-105	121	36	usin	usin	PROPN
fis-105	121	37	ee	ee	ADP
fis-105	121	38	different	different	ADJ
fis-105	121	39	p	p	NOUN
fis-105	121	40	reover	reover	ADV
fis-105	121	41	,	,	PUNCT
fis-105	121	42	plasm	plasm	NOUN
fis-105	121	43	e	e	NOUN
fis-105	121	44	duration	duration	NOUN
fis-105	121	45	for	for	ADP
fis-105	121	46	was	be	AUX
fis-105	121	47	the	the	DET
fis-105	121	48	same	same	ADJ
fis-105	121	49	4	4	NUM
fis-105	121	50	0.06	0.06	NUM
fis-105	121	51	ed	ed	NOUN
fis-105	121	52	displaceme	displaceme	PROPN
fis-105	121	53	ment	ment	PROPN
fis-105	121	54	curves	curve	NOUN
fis-105	121	55	fo	fo	ADP
fis-105	121	56	maximum	maximum	ADJ
fis-105	121	57	for	for	ADP
fis-105	121	58	for	for	ADP
fis-105	121	59	samples	sample	NOUN
fis-105	121	60	a	a	DET
fis-105	121	61	ers	er	NOUN
fis-105	121	62	leads	lead	VERB
fis-105	121	63	to	to	ADP
fis-105	121	64	di	di	VERB
fis-105	121	65	and	and	CCONJ
fis-105	121	66	changing	change	VERB
fis-105	121	67	ng	ng	PROPN
fis-105	121	68	of	of	ADP
fis-105	121	69	an	an	DET
fis-105	121	70	unstr	unstr	PROPN
fis-105	121	71	t	t	PROPN
fis-105	121	72	deviation	deviation	NOUN
fis-105	121	73	be	be	AUX
fis-105	121	74	asing	asing	PROPN
fis-105	121	75	wafer	wafer	NOUN
fis-105	121	76	he	he	PRON
fis-105	121	77	sity	sity	NOUN
fis-105	121	78	coefficien	coefficien	PROPN
fis-105	122	1	he	he	PRON
fis-105	122	2	same	same	ADJ
fis-105	122	3	geo	geo	PROPN
fis-105	122	4	cture	cture	PROPN
fis-105	122	5	toughne	toughne	PROPN
fis-105	122	6	gher	gher	PROPN
fis-105	122	7	maximum	maximum	PROPN
fis-105	122	8	ss	ss	PROPN
fis-105	122	9	of	of	ADP
fis-105	122	10	the	the	DET
fis-105	122	11	spec	spec	PROPN
fis-105	122	12	asma	asma	PROPN
fis-105	122	13	,	,	PUNCT
fis-105	122	14	before	before	SCONJ
fis-105	122	15	b	b	NUM
fis-105	122	16	mum	mum	NOUN
fis-105	122	17	force	force	VERB
fis-105	122	18	an	an	DET
fis-105	122	19	y	y	PROPN
fis-105	122	20	other	other	ADJ
fis-105	122	21	pre	pre	PROPN
fis-105	122	22	-	-	PROPN
fis-105	122	23	t	t	ADJ
fis-105	122	24	mperatures	mperature	NOUN
fis-105	122	25	.	.	PUNCT
fis-105	123	1	fu	fu	PROPN
fis-105	123	2	much	much	ADJ
fis-105	123	3	highe	highe	PROPN
fis-105	123	4	gf	gf	PROPN
fis-105	123	5	-	-	NOUN
fis-105	123	6	esis.15.03	esis.15.03	NOUN
fis-105	123	7	nt	not	PART
fis-105	123	8	has	have	VERB
fis-105	123	9	to	to	PART
fis-105	123	10	be	be	AUX
fis-105	123	11	c	c	PROPN
fis-105	123	12	ng	ng	PROPN
fis-105	123	13	different	different	ADJ
fis-105	123	14	pre	pre	NOUN
fis-105	123	15	-	-	ADJ
fis-105	123	16	treatments	treatments	ADJ
fis-105	123	17	ma	ma	NOUN
fis-105	123	18	activation	activation	NOUN
fis-105	123	19	r	r	NOUN
fis-105	123	20	the	the	DET
fis-105	123	21	plasma	plasma	NOUN
fis-105	123	22	t	t	NOUN
fis-105	123	23	for	for	ADP
fis-105	123	24	all	all	DET
fis-105	123	25	three	three	NUM
fis-105	123	26	s	s	NOUN
fis-105	123	27	0.08	0.08	NUM
fis-105	123	28	0	0	NUM
fis-105	123	29	ent	ent	NOUN
fis-105	123	30	[	[	X
fis-105	123	31	mm	mm	X
fis-105	123	32	]	]	X
fis-105	123	33	or	or	CCONJ
fis-105	123	34	different	different	ADJ
fis-105	123	35	pre	pre	NOUN
fis-105	123	36	rces	rce	NOUN
fis-105	123	37	are	be	AUX
fis-105	123	38	appro	appro	ADV
fis-105	123	39	activated	activate	VERB
fis-105	123	40	in	in	ADP
fis-105	124	1	n	n	DET
fis-105	124	2	ifferent	ifferent	NOUN
fis-105	124	3	functi	functi	VERB
fis-105	124	4	g	g	PROPN
fis-105	124	5	the	the	DET
fis-105	124	6	position	position	NOUN
fis-105	124	7	ructured	ructure	VERB
fis-105	124	8	and	and	CCONJ
fis-105	124	9	etween	etween	VERB
fis-105	124	10	the	the	DET
fis-105	124	11	fu	fu	ADJ
fis-105	124	12	eight	eight	NUM
fis-105	124	13	.	.	PUNCT
fis-105	125	1	nt	not	PART
fis-105	125	2	and	and	CCONJ
fis-105	125	3	the	the	DET
fis-105	125	4	ma	ma	PROPN
fis-105	125	5	ometries	ometrie	VERB
fis-105	125	6	the	the	DET
fis-105	125	7	esses	esse	NOUN
fis-105	125	8	can	can	AUX
fis-105	125	9	be	be	AUX
fis-105	125	10	o	o	NOUN
fis-105	125	11	m	m	NOUN
fis-105	125	12	forces	force	NOUN
fis-105	125	13	and	and	CCONJ
fis-105	125	14	cimens	cimen	NOUN
fis-105	125	15	can	can	AUX
fis-105	125	16	b	b	NOUN
fis-105	125	17	bonding	bonding	NOUN
fis-105	125	18	,	,	PUNCT
fis-105	125	19	fig	fig	NOUN
fis-105	125	20	.	.	PUNCT
fis-105	126	1	d	d	X
fis-105	126	2	therefore	therefore	ADV
fis-105	126	3	t	t	PROPN
fis-105	126	4	treatment	treatment	NOUN
fis-105	126	5	.	.	PUNCT
fis-105	127	1	th	th	X
fis-105	127	2	urthermore	urthermore	PROPN
fis-105	127	3	,	,	PUNCT
fis-105	127	4	t	t	PROPN
fis-105	127	5	er	er	INTJ
fis-105	127	6	than	than	ADP
fis-105	127	7	the	the	DET
fis-105	127	8	o	o	NOUN
fis-105	127	9	characterised	characterise	VERB
fis-105	127	10	plasmas	plasma	NOUN
fis-105	127	11	and	and	CCONJ
fis-105	127	12	s	s	NOUN
fis-105	127	13	are	be	AUX
fis-105	127	14	compar	compar	NOUN
fis-105	127	15	ns	ns	ADJ
fis-105	127	16	in	in	ADP
fis-105	127	17	oxygen	oxygen	NOUN
fis-105	127	18	treatment	treatment	NOUN
fis-105	127	19	for	for	ADP
fis-105	127	20	stacks	stack	NOUN
fis-105	127	21	,	,	PUNCT
fis-105	127	22	too	too	ADV
fis-105	127	23	.	.	PUNCT
fis-105	128	1	t	t	NOUN
fis-105	128	2	0.10	0.10	NUM
fis-105	128	3	0.12	0.12	NUM
fis-105	128	4	reference	reference	NOUN
fis-105	128	5	oxygen	oxygen	NOUN
fis-105	128	6	plasm	plasm	NOUN
fis-105	128	7	nitrogen	nitrogen	NOUN
fis-105	128	8	plasm	plasm	NOUN
fis-105	128	9	-treatments	-treatment	NOUN
fis-105	128	10	.	.	PUNCT
fis-105	129	1	oximately	oximately	ADV
fis-105	129	2	thr	thr	VERB
fis-105	129	3	nitrogen	nitrogen	NOUN
fis-105	129	4	plasm	plasm	NOUN
fis-105	129	5	ions	ion	NOUN
fis-105	129	6	for	for	ADP
fis-105	129	7	the	the	DET
fis-105	129	8	s	s	X
fis-105	129	9	n	n	PRON
fis-105	129	10	of	of	ADP
fis-105	129	11	the	the	DET
fis-105	129	12	struc	struc	NOUN
fis-105	129	13	a	a	DET
fis-105	129	14	structured	structured	ADJ
fis-105	129	15	c	c	PROPN
fis-105	129	16	unctions	unction	NOUN
fis-105	129	17	and	and	CCONJ
fis-105	129	18	aximum	aximum	ADJ
fis-105	129	19	force	force	NOUN
fis-105	129	20	fracture	fracture	PROPN
fis-105	129	21	toug	toug	NOUN
fis-105	129	22	observed	observe	VERB
fis-105	129	23	for	for	ADP
fis-105	129	24	l	l	NOUN
fis-105	129	25	d	d	NOUN
fis-105	129	26	also	also	ADV
fis-105	129	27	to	to	PART
fis-105	129	28	high	high	ADJ
fis-105	129	29	be	be	AUX
fis-105	129	30	significantl	significantl	NOUN
fis-105	129	31	.	.	PUNCT
fis-105	130	1	8	8	X
fis-105	130	2	.	.	X
fis-105	131	1	the	the	DET
fis-105	131	2	fracture	fracture	NOUN
fis-105	131	3	to	to	ADP
fis-105	131	4	he	he	PRON
fis-105	131	5	deviation	deviation	VERB
fis-105	131	6	b	b	NOUN
fis-105	131	7	the	the	DET
fis-105	131	8	fracture	fracture	NOUN
fis-105	131	9	t	t	PROPN
fis-105	131	10	one	one	NUM
fis-105	131	11	of	of	ADP
fis-105	131	12	non	non	NOUN
fis-105	131	13	-	-	NOUN
fis-105	131	14	a	a	PRON
fis-105	131	15	as	as	ADV
fis-105	131	16	well	well	ADV
fis-105	131	17	.	.	PUNCT
fis-105	132	1	as	as	SCONJ
fis-105	132	2	al	al	PROPN
fis-105	132	3	different	different	ADJ
fis-105	132	4	pro	pro	ADJ
fis-105	132	5	red	red	NOUN
fis-105	132	6	in	in	ADP
fis-105	132	7	the	the	DET
fis-105	132	8	pre	pre	X
fis-105	132	9	(	(	PUNCT
fis-105	132	10	o2	o2	ADJ
fis-105	132	11	-	-	PUNCT
fis-105	132	12	plasma	plasma	NOUN
fis-105	132	13	)	)	PUNCT
fis-105	133	1	r	r	NOUN
fis-105	133	2	the	the	DET
fis-105	133	3	activated	activate	VERB
fis-105	133	4	the	the	DET
fis-105	133	5	maximum	maximum	ADJ
fis-105	133	6	2	2	NUM
fis-105	133	7	ma	ma	PROPN
fis-105	133	8	ma	ma	PROPN
fis-105	133	9	ee	ee	PROPN
fis-105	133	10	times	times	PROPN
fis-105	133	11	high	high	PROPN
fis-105	133	12	ma	ma	PROPN
fis-105	133	13	are	be	AUX
fis-105	133	14	a	a	DET
fis-105	133	15	little	little	ADJ
fis-105	133	16	stress	stress	NOUN
fis-105	133	17	intensit	intensit	NOUN
fis-105	133	18	cture	cture	NOUN
fis-105	133	19	by	by	ADP
fis-105	133	20	usin	usin	PROPN
fis-105	133	21	chip	chip	PROPN
fis-105	133	22	(	(	PUNCT
fis-105	133	23	si	si	NOUN
fis-105	133	24	-	-	ADJ
fis-105	133	25	si	si	X
fis-105	133	26	ge	ge	PROPN
fis-105	133	27	minima	minima	PROPN
fis-105	133	28	of	of	ADP
fis-105	133	29	th	th	X
fis-105	133	30	e	e	NOUN
fis-105	133	31	recorded	record	VERB
fis-105	133	32	du	du	PROPN
fis-105	133	33	ghness	ghness	NOUN
fis-105	133	34	only	only	ADV
fis-105	133	35	lower	lower	ADV
fis-105	133	36	anneali	anneali	VERB
fis-105	133	37	her	her	PRON
fis-105	133	38	fracture	fracture	NOUN
fis-105	133	39	t	t	NOUN
fis-105	133	40	ly	ly	ADP
fis-105	133	41	increased	increase	VERB
fis-105	133	42	oughness	oughness	NOUN
fis-105	133	43	of	of	ADP
fis-105	133	44	between	between	ADP
fis-105	133	45	oxyg	oxyg	NOUN
fis-105	133	46	toughness	toughness	NOUN
fis-105	133	47	of	of	ADP
fis-105	133	48	activated	activate	VERB
fis-105	133	49	spec	spec	PROPN
fis-105	133	50	lready	lready	PROPN
fis-105	133	51	mentio	mentio	PROPN
fis-105	133	52	ocess	ocess	NOUN
fis-105	133	53	gases	gas	NOUN
fis-105	133	54	.	.	PUNCT
fis-105	134	1	esent	esent	NOUN
fis-105	134	2	paper	paper	NOUN
fis-105	134	3	.	.	PUNCT
fis-105	135	1	and	and	CCONJ
fis-105	135	2	in	in	ADP
fis-105	135	3	nitro	nitro	NOUN
fis-105	135	4	d	d	PROPN
fis-105	135	5	stacks	stack	NOUN
fis-105	135	6	was	be	AUX
fis-105	135	7	b	b	NUM
fis-105	135	8	m	m	NOUN
fis-105	135	9	forces	force	NOUN
fis-105	135	10	of	of	ADP
fis-105	135	11	th	th	PRON
fis-105	135	12	her	she	PRON
fis-105	135	13	than	than	ADP
fis-105	135	14	the	the	DET
fis-105	135	15	o	o	X
fis-105	135	16	e	e	NOUN
fis-105	135	17	bit	bite	VERB
fis-105	135	18	smaller	small	ADJ
fis-105	135	19	t	t	NOUN
fis-105	135	20	ty	ty	INTJ
fis-105	135	21	coefficient	coefficient	PROPN
fis-105	135	22	ng	ng	PROPN
fis-105	135	23	two	two	NUM
fis-105	135	24	structu	structu	ADJ
fis-105	135	25	ometry	ometry	NOUN
fis-105	135	26	1	1	NUM
fis-105	135	27	)	)	PUNCT
fis-105	135	28	,	,	PUNCT
fis-105	135	29	on	on	ADP
fis-105	135	30	he	he	PRON
fis-105	135	31	stress	stress	NOUN
fis-105	135	32	inten	inten	VERB
fis-105	135	33	uring	ure	VERB
fis-105	135	34	experim	experim	NOUN
fis-105	135	35	depends	depend	VERB
fis-105	135	36	on	on	ADP
fis-105	135	37	ing	ing	ADJ
fis-105	135	38	temperatu	temperatu	NOUN
fis-105	135	39	toughnesses	toughness	NOUN
fis-105	135	40	.	.	PUNCT
fis-105	136	1	by	by	ADP
fis-105	136	2	activating	activate	VERB
fis-105	136	3	oxygen	oxygen	NOUN
fis-105	136	4	activ	activ	PROPN
fis-105	136	5	gen	gen	PROPN
fis-105	136	6	and	and	CCONJ
fis-105	136	7	nitro	nitro	NOUN
fis-105	136	8	plasma	plasma	NOUN
fis-105	136	9	activ	activ	NOUN
fis-105	136	10	cimens	cimen	VERB
fis-105	136	11	at	at	ADP
fis-105	136	12	hig	hig	PROPN
fis-105	136	13	oned	one	VERB
fis-105	136	14	the	the	DET
fis-105	136	15	the	the	DET
fis-105	136	16	ogen	ogen	PROPN
fis-105	136	17	both	both	CCONJ
fis-105	136	18	hese	hese	VERB
fis-105	136	19	once	once	ADV
fis-105	136	20	than	than	ADP
fis-105	136	21	and	and	CCONJ
fis-105	136	22	ured	ure	VERB
fis-105	136	23	nly	nly	ADV
fis-105	136	24	a	a	DET
fis-105	136	25	nsity	nsity	NOUN
fis-105	136	26	ment	ment	NOUN
fis-105	136	27	,	,	PUNCT
fis-105	136	28	the	the	DET
fis-105	136	29	ures	ure	NOUN
fis-105	136	30	.	.	PUNCT
fis-105	137	1	the	the	DET
fis-105	137	2	g	g	PROPN
fis-105	137	3	the	the	DET
fis-105	137	4	vated	vate	VERB
fis-105	137	5	ogen	ogen	PROPN
fis-105	137	6	vated	vate	VERB
fis-105	137	7	gher	gher	NOUN
fis-105	137	8	http://dx.medra.org/10.3221/igf-esis.15.03&auth=true	http://dx.medra.org/10.3221/igf-esis.15.03&auth=true	PROPN
fis-105	137	9	http://www.gruppofrattura.it	http://www.gruppofrattura.it	PROPN
fis-105	137	10	co	co	PROPN
fis-105	137	11	act	act	PROPN
fis-105	137	12	of	of	ADP
fis-105	137	13	b	b	PROPN
fis-105	137	14	t	t	PROPN
fis-105	137	15	onclusion	onclusion	NOUN
fis-105	137	16	he	he	PRON
fis-105	137	17	comp	comp	VERB
fis-105	137	18	the	the	DET
fis-105	137	19	influ	influ	ADJ
fis-105	137	20	treatmen	treatman	NOUN
fis-105	137	21	tivated	tivate	VERB
fis-105	137	22	wafers	wafer	NOUN
fis-105	137	23	bonding	bond	VERB
fis-105	137	24	stren	stren	PROPN
fis-105	137	25	t	t	PROPN
fis-105	137	26	st	st	PROPN
fis-105	137	27	re	re	AUX
fis-105	137	28	ss	ss	VERB
fis-105	137	29	in	in	ADP
fis-105	137	30	te	te	PROPN
fis-105	137	31	ns	ns	NUM
fis-105	137	32	ity	ity	PROPN
fis-105	137	33	co	co	X
fis-105	137	34	ef	ef	PROPN
fis-105	137	35	fic	fic	PROPN
fis-105	137	36	ie	ie	PROPN
fis-105	137	37	nt	not	PART
fis-105	137	38	y	y	PROPN
fis-105	137	39	(	(	PUNCT
fis-105	137	40			X
fis-105	137	41	)	)	PUNCT
fis-105	137	42	figure	figure	NOUN
fis-105	137	43	7	7	NUM
fis-105	137	44	:	:	PUNCT
fis-105	137	45	e	e	NOUN
fis-105	137	46	ns	ns	NUM
fis-105	137	47	pliance	pliance	NOUN
fis-105	137	48	meth	meth	NOUN
fis-105	137	49	uence	uence	NOUN
fis-105	137	50	of	of	ADP
fis-105	137	51	the	the	DET
fis-105	137	52	s	s	NOUN
fis-105	137	53	nt	not	PART
fis-105	137	54	and	and	CCONJ
fis-105	137	55	the	the	DET
fis-105	137	56	b	b	PROPN
fis-105	137	57	s	s	PROPN
fis-105	137	58	during	during	ADP
fis-105	137	59	the	the	DET
fis-105	137	60	m	m	NOUN
fis-105	137	61	ngth	ngth	NOUN
fis-105	137	62	.	.	PUNCT
fis-105	138	1	0.0	0.0	NUM
fis-105	138	2	50	50	NUM
fis-105	138	3	60	60	NUM
fis-105	138	4	70	70	NUM
fis-105	138	5	80	80	NUM
fis-105	138	6	90	90	NUM
fis-105	138	7	100	100	NUM
fis-105	138	8	st	st	PROPN
fis-105	138	9	re	re	VERB
fis-105	138	10	ss	ss	PROPN
fis-105	138	11	in	in	ADP
fis-105	138	12	te	te	PROPN
fis-105	138	13	ns	ns	NUM
fis-105	138	14	ity	ity	PROPN
fis-105	138	15	c	c	PROPN
fis-105	138	16	oe	oe	PROPN
fis-105	138	17	ffi	ffi	PROPN
fis-105	138	18	ci	ci	PROPN
fis-105	138	19	en	en	PROPN
fis-105	138	20	t	t	PROPN
fis-105	138	21	y	y	PROPN
fis-105	138	22	(	(	PUNCT
fis-105	138	23			X
fis-105	138	24	)	)	PUNCT
fis-105	138	25	estimation	estimation	NOUN
fis-105	138	26	of	of	ADP
fis-105	138	27	0	0	NUM
fis-105	138	28	0	0	NUM
fis-105	138	29	1	1	NUM
fis-105	138	30	2	2	NUM
fis-105	138	31	3	3	NUM
fis-105	138	32	4	4	NUM
fis-105	138	33	5	5	NUM
fis-105	138	34	6	6	NUM
fis-105	138	35	m	m	NOUN
fis-105	138	36	ax	ax	NOUN
fis-105	138	37	i	i	PRON
fis-105	138	38	m	m	VERB
fis-105	138	39	um	um	INTJ
fis-105	138	40	fo	fo	INTJ
fis-105	138	41	rc	rc	PROPN
fis-105	138	42	e	e	PROPN
fis-105	138	43	[	[	X
fis-105	138	44	n	n	X
fis-105	138	45	]	]	PUNCT
fis-105	138	46	figure	figure	NOUN
fis-105	138	47	8	8	NUM
fis-105	138	48	:	:	PUNCT
fis-105	138	49	m	m	VERB
fis-105	138	50	od	od	NOUN
fis-105	138	51	is	be	AUX
fis-105	138	52	a	a	DET
fis-105	138	53	suitab	suitab	NOUN
fis-105	138	54	specimen	speciman	NOUN
fis-105	138	55	geo	geo	PROPN
fis-105	138	56	bonding	bonding	NOUN
fis-105	138	57	temp	temp	NOUN
fis-105	138	58	manufacturin	manufacturin	NOUN
fis-105	138	59	k.	k.	PROPN
fis-105	138	60	vogel	vogel	PROPN
fis-105	138	61	et	et	PROPN
fis-105	138	62	0.1	0.1	NUM
fis-105	138	63	0	0	NUM
fis-105	138	64	r	r	NOUN
fis-105	138	65	dimensionless	dimensionless	NOUN
fis-105	138	66	50	50	NUM
fis-105	138	67	40	40	NUM
fis-105	138	68	ann	ann	PROPN
fis-105	138	69	maximum	maximum	ADJ
fis-105	138	70	forc	forc	NOUN
fis-105	138	71	ble	ble	ADJ
fis-105	138	72	approach	approach	NOUN
fis-105	138	73	ometry	ometry	NOUN
fis-105	138	74	is	be	AUX
fis-105	138	75	con	con	PROPN
fis-105	138	76	perature	perature	NOUN
fis-105	138	77	itself	itself	PRON
fis-105	138	78	ng	ng	PROPN
fis-105	138	79	process	process	NOUN
fis-105	138	80	lea	lea	PROPN
fis-105	138	81	alii	alii	PROPN
fis-105	138	82	,	,	PUNCT
fis-105	138	83	frattura	frattura	NOUN
fis-105	138	84	ed	ed	PROPN
fis-105	138	85	.2	.2	NUM
fis-105	138	86	0.3	0.3	NUM
fis-105	138	87	relative	relative	ADJ
fis-105	138	88	crack	crack	NOUN
fis-105	138	89	min	min	PROPN
fis-105	138	90	s	s	PART
fis-105	138	91	stress	stress	NOUN
fis-105	138	92	intensit	intensit	NOUN
fis-105	138	93	100	100	NUM
fis-105	138	94	nealing	neale	VERB
fis-105	138	95	tempe	tempe	PROPN
fis-105	138	96	non	non	ADJ
fis-105	138	97	-	-	ADJ
fis-105	138	98	activate	activate	VERB
fis-105	138	99	oxygen	oxygen	NOUN
fis-105	138	100	acti	acti	PROPN
fis-105	138	101	nitrogen	nitrogen	PROPN
fis-105	138	102	act	act	PROPN
fis-105	138	103	ces	ces	PROPN
fis-105	138	104	for	for	ADP
fis-105	138	105	differen	differen	NOUN
fis-105	138	106	to	to	PART
fis-105	138	107	estimate	estimate	VERB
fis-105	138	108	nsidered	nsidere	VERB
fis-105	138	109	durin	durin	PROPN
fis-105	138	110	f	f	PROPN
fis-105	138	111	directly	directly	ADV
fis-105	138	112	affe	affe	VERB
fis-105	138	113	ads	ad	NOUN
fis-105	138	114	to	to	ADP
fis-105	138	115	signific	signific	PROPN
fis-105	138	116	d	d	PROPN
fis-105	138	117	integrità	integrità	PROPN
fis-105	138	118	struttu	struttu	NOUN
fis-105	138	119	0.4	0.4	NUM
fis-105	138	120	length	length	NOUN
fis-105	138	121			NOUN
fis-105	138	122	si	si	ADJ
fis-105	138	123	-	-	PUNCT
fis-105	138	124	si	si	X
fis-105	138	125	geom	geom	PROPN
fis-105	138	126	si	si	PROPN
fis-105	138	127	-	-	PUNCT
fis-105	138	128	si	si	PROPN
fis-105	138	129	geom	geom	PROPN
fis-105	138	130	ty	ty	INTJ
fis-105	138	131	coefficient	coefficient	VERB
fis-105	138	132	a	a	DET
fis-105	138	133	0	0	NUM
fis-105	138	134	1	1	NUM
fis-105	138	135	erature	erature	NOUN
fis-105	138	136	[	[	X
fis-105	138	137	°	°	SCONJ
fis-105	138	138	c	c	NOUN
fis-105	138	139	]	]	X
fis-105	138	140	ed	ed	NOUN
fis-105	138	141	vated	vate	VERB
fis-105	138	142	tivated	tivate	VERB
fis-105	138	143	nt	not	PART
fis-105	138	144	pre	pre	VERB
fis-105	138	145	and	and	CCONJ
fis-105	138	146	heat	heat	VERB
fis-105	138	147	the	the	DET
fis-105	138	148	fracture	fracture	NOUN
fis-105	138	149	t	t	PROPN
fis-105	138	150	ng	ng	PROPN
fis-105	138	151	the	the	DET
fis-105	138	152	calcula	calcula	PROPN
fis-105	138	153	ect	ect	VERB
fis-105	138	154	the	the	DET
fis-105	138	155	measu	measu	PROPN
fis-105	138	156	cantly	cantly	ADV
fis-105	138	157	reduced	reduce	VERB
fis-105	138	158	turale	turale	NOUN
fis-105	138	159	,	,	PUNCT
fis-105	138	160	15	15	NUM
fis-105	138	161	(	(	PUNCT
fis-105	138	162	2011	2011	NUM
fis-105	138	163	)	)	PUNCT
fis-105	138	164	0.5	0.5	NUM
fis-105	138	165	metry	metry	NOUN
fis-105	138	166	1	1	NUM
fis-105	138	167	metry	metry	NOUN
fis-105	138	168	2	2	NUM
fis-105	138	169	as	as	ADP
fis-105	138	170	a	a	DET
fis-105	138	171	function	function	NOUN
fis-105	138	172	of	of	ADP
fis-105	138	173	150	150	NUM
fis-105	138	174	anne	anne	PROPN
fis-105	138	175	treatments	treatment	NOUN
fis-105	138	176	.	.	PUNCT
fis-105	139	1	toughness	toughness	NOUN
fis-105	139	2	of	of	ADP
fis-105	139	3	ation	ation	NOUN
fis-105	139	4	of	of	ADP
fis-105	139	5	stress	stress	NOUN
fis-105	139	6	ured	ured	ADJ
fis-105	139	7	maximu	maximu	NOUN
fis-105	140	1	d	d	ADP
fis-105	140	2	annealing	anneal	VERB
fis-105	140	3	t	t	PROPN
fis-105	140	4	)	)	PUNCT
fis-105	140	5	21	21	NUM
fis-105	140	6	-	-	SYM
fis-105	140	7	28	28	NUM
fis-105	140	8	;	;	PUNCT
fis-105	140	9	doi	doi	NOUN
fis-105	140	10	:	:	PUNCT
fis-105	140	11	10	10	NUM
fis-105	140	12	0.6	0.6	NUM
fis-105	140	13	f	f	PROPN
fis-105	140	14	geometry	geometry	NOUN
fis-105	140	15	.	.	PUNCT
fis-105	141	1	ealing	eale	VERB
fis-105	141	2	[	[	X
fis-105	141	3	°	°	ADP
fis-105	141	4	c	c	X
fis-105	141	5	]	]	X
fis-105	141	6	f	f	X
fis-105	141	7	direct	direct	ADJ
fis-105	141	8	bond	bond	NOUN
fis-105	141	9	s	s	PART
fis-105	141	10	intensity	intensity	NOUN
fis-105	141	11	coe	coe	PROPN
fis-105	141	12	um	um	INTJ
fis-105	141	13	force	force	NOUN
fis-105	141	14	.	.	PUNCT
fis-105	142	1	th	th	X
fis-105	142	2	temperatures	temperature	NOUN
fis-105	142	3	0.3221	0.3221	NUM
fis-105	142	4	/	/	SYM
fis-105	142	5	igf	igf	NOUN
fis-105	142	6	-	-	NOUN
fis-105	142	7	esis	esis	NOUN
fis-105	142	8	.	.	PUNCT
fis-105	143	1	ed	ed	NOUN
fis-105	143	2	wafers	wafer	NOUN
fis-105	143	3	.	.	PUNCT
fis-105	144	1	w	w	NOUN
fis-105	144	2	efficient	efficient	ADJ
fis-105	144	3	,	,	PUNCT
fis-105	144	4	the	the	DET
fis-105	144	5	he	he	PRON
fis-105	144	6	use	use	NOUN
fis-105	144	7	of	of	ADP
fis-105	144	8	pla	pla	NOUN
fis-105	144	9	without	without	ADP
fis-105	144	10	any	any	DET
fis-105	144	11	15.03	15.03	NUM
fis-105	144	12	27	27	NUM
fis-105	144	13	while	while	SCONJ
fis-105	144	14	preasma	preasma	NOUN
fis-105	144	15	loss	loss	NOUN
fis-105	144	16	http://dx.medra.org/10.3221/igf-esis.15.03&auth=true	http://dx.medra.org/10.3221/igf-esis.15.03&auth=true	PROPN
fis-105	144	17	http://www.gruppofrattura.it	http://www.gruppofrattura.it	PROPN
fis-105	144	18	k.	k.	PROPN
fis-105	144	19	v	v	PROPN
fis-105	144	20	28	28	NUM
fis-105	144	21	cu	cu	PROPN
fis-105	144	22	the	the	DET
fis-105	144	23	dep	dep	PROPN
fis-105	144	24	re	re	NOUN
fis-105	145	1	[	[	X
fis-105	145	2	1	1	X
fis-105	145	3	]	]	X
fis-105	145	4	[	[	X
fis-105	145	5	2	2	X
fis-105	145	6	]	]	X
fis-105	146	1	[	[	X
fis-105	146	2	3	3	X
fis-105	146	3	]	]	X
fis-105	146	4	[	[	X
fis-105	146	5	4	4	X
fis-105	146	6	]	]	X
fis-105	146	7	[	[	X
fis-105	146	8	5	5	NUM
fis-105	146	9	]	]	X
fis-105	146	10	[	[	X
fis-105	146	11	6	6	NUM
fis-105	146	12	]	]	X
fis-105	146	13	[	[	X
fis-105	146	14	7	7	X
fis-105	146	15	]	]	X
fis-105	146	16	[	[	X
fis-105	146	17	8	8	NUM
fis-105	146	18	]	]	X
fis-105	146	19	[	[	X
fis-105	146	20	9	9	NUM
fis-105	146	21	]	]	X
fis-105	146	22	[	[	X
fis-105	146	23	10	10	NUM
fis-105	146	24	vogel	vogel	PROPN
fis-105	146	25	et	et	PROPN
fis-105	146	26	alii	alii	PROPN
fis-105	146	27	,	,	PUNCT
fis-105	146	28	fra	fra	NOUN
fis-105	146	29	urrently	urrently	ADV
fis-105	146	30	,	,	PUNCT
fis-105	146	31	the	the	DET
fis-105	146	32	s	s	X
fis-105	146	33	e	e	NOUN
fis-105	146	34	results	result	NOUN
fis-105	146	35	of	of	ADP
fis-105	146	36	t	t	NOUN
fis-105	146	37	pending	pende	VERB
fis-105	146	38	on	on	ADP
fis-105	146	39	th	th	PROPN
fis-105	146	40	eferences	eference	NOUN
fis-105	146	41	g.	g.	PROPN
fis-105	146	42	gerlach	gerlach	PROPN
fis-105	146	43	,	,	PUNCT
fis-105	146	44	m.	m.	NOUN
fis-105	146	45	wiemer	wiemer	PROPN
fis-105	146	46	b.	b.	PROPN
fis-105	146	47	michel	michel	PROPN
fis-105	146	48	,	,	PUNCT
fis-105	146	49	r	r	NOUN
fis-105	146	50	m.	m.	NOUN
fis-105	146	51	wiemer	wiemer	NOUN
fis-105	146	52	,	,	PUNCT
fis-105	146	53	d.	d.	PROPN
fis-105	146	54	wuensch	wuensch	VERB
fis-105	146	55	q.	q.	PROPN
fis-105	146	56	tong	tong	PROPN
fis-105	146	57	,	,	PUNCT
fis-105	146	58	u	u	PROPN
fis-105	146	59	m.	m.	NOUN
fis-105	146	60	wiemer	wiemer	NOUN
fis-105	146	61	682e	682e	PROPN
fis-105	146	62	(	(	PUNCT
fis-105	146	63	2001	2001	NUM
fis-105	146	64	a.	a.	NOUN
fis-105	146	65	ploessl	ploessl	PROPN
fis-105	146	66	,	,	PUNCT
fis-105	146	67	g	g	PROPN
fis-105	146	68	t.	t.	PROPN
fis-105	146	69	suni	suni	PROPN
fis-105	146	70	,	,	PUNCT
fis-105	146	71	di	di	X
fis-105	146	72	(	(	PUNCT
fis-105	146	73	2006	2006	NUM
fis-105	146	74	)	)	PUNCT
fis-105	146	75	.	.	PUNCT
fis-105	147	1	j.	j.	PROPN
fis-105	147	2	bagdahn	bagdahn	PROPN
fis-105	147	3	,	,	PUNCT
fis-105	147	4	0	0	NUM
fis-105	147	5	]	]	X
fis-105	147	6	d.	d.	PROPN
fis-105	147	7	munz	munz	PROPN
fis-105	147	8	,	,	PUNCT
fis-105	147	9	r	r	NOUN
fis-105	147	10	attura	attura	NOUN
fis-105	147	11	ed	ed	PROPN
fis-105	147	12	integrit	integrit	PROPN
fis-105	147	13	stress	stress	NOUN
fis-105	147	14	intensit	intensit	VERB
fis-105	147	15	the	the	DET
fis-105	147	16	complian	complian	NOUN
fis-105	147	17	he	he	PRON
fis-105	147	18	applied	apply	VERB
fis-105	147	19	loa	loa	PROPN
fis-105	147	20	s	s	PROPN
fis-105	147	21	,	,	PUNCT
fis-105	147	22	w.	w.	PROPN
fis-105	147	23	doetzel	doetzel	PROPN
fis-105	147	24	:	:	PUNCT
fis-105	147	25	r	r	X
fis-105	147	26	,	,	PUNCT
fis-105	147	27	j.	j.	PROPN
fis-105	147	28	froemel	froemel	PROPN
fis-105	147	29	,	,	PUNCT
fis-105	147	30	r.	r.	PROPN
fis-105	147	31	aschenbre	aschenbre	PROPN
fis-105	147	32	,	,	PUNCT
fis-105	147	33	j.	j.	PROPN
fis-105	147	34	froemel	froemel	PROPN
fis-105	147	35	,	,	PUNCT
fis-105	147	36	m	m	PROPN
fis-105	147	37	h	h	NOUN
fis-105	147	38	,	,	PUNCT
fis-105	147	39	b.	b.	PROPN
fis-105	147	40	mueller	mueller	PROPN
fis-105	147	41	,	,	PUNCT
fis-105	147	42	u.	u.	PROPN
fis-105	147	43	goesele	goesele	PROPN
fis-105	147	44	,	,	PUNCT
fis-105	147	45	se	se	X
fis-105	147	46	,	,	PUNCT
fis-105	147	47	t.	t.	PROPN
fis-105	147	48	otto	otto	PROPN
fis-105	147	49	,	,	PUNCT
fis-105	147	50	t.	t.	PROPN
fis-105	147	51	)	)	PUNCT
fis-105	147	52	.	.	PUNCT
fis-105	148	1	g.	g.	PROPN
fis-105	148	2	kraeuter	kraeuter	PROPN
fis-105	148	3	,	,	PUNCT
fis-105	148	4	irect	irect	ADJ
fis-105	148	5	wafer	wafer	NOUN
fis-105	148	6	b	b	NOUN
fis-105	148	7	a.	a.	NOUN
fis-105	148	8	ploessl	ploessl	NOUN
fis-105	148	9	,	,	PUNCT
fis-105	148	10	m	m	PROPN
fis-105	148	11	r.t	r.t	PROPN
fis-105	148	12	.	.	PROPN
fis-105	148	13	bubsey	bubsey	PROPN
fis-105	148	14	,	,	PUNCT
fis-105	148	15	j	j	PROPN
fis-105	148	16	tà	tà	NOUN
fis-105	148	17	strutturale	strutturale	PROPN
fis-105	148	18	,	,	PUNCT
fis-105	148	19	15	15	NUM
fis-105	148	20	ty	ty	NOUN
fis-105	148	21	coefficient	coefficient	NOUN
fis-105	148	22	nce	nce	NOUN
fis-105	148	23	method	method	NOUN
fis-105	148	24	.	.	PUNCT
fis-105	149	1	ad	ad	NOUN
fis-105	149	2	will	will	AUX
fis-105	149	3	be	be	AUX
fis-105	149	4	carr	carr	NOUN
fis-105	149	5	introduction	introduction	NOUN
fis-105	149	6	t.	t.	PROPN
fis-105	149	7	gessner	gessner	NOUN
fis-105	149	8	,	,	PUNCT
fis-105	149	9	enner	enner	ADJ
fis-105	149	10	,	,	PUNCT
fis-105	149	11	(	(	PUNCT
fis-105	149	12	2004	2004	NUM
fis-105	149	13	)	)	PUNCT
fis-105	149	14	m.	m.	NOUN
fis-105	149	15	haubold	haubold	PROPN
fis-105	149	16	,	,	PUNCT
fis-105	149	17	,	,	PUNCT
fis-105	149	18	m.	m.	NOUN
fis-105	149	19	wiemer	wiemer	NOUN
fis-105	149	20	,	,	PUNCT
fis-105	149	21	emiconductor	emiconductor	NOUN
fis-105	149	22	gessner	gessner	NOUN
fis-105	149	23	,	,	PUNCT
fis-105	149	24	k.	k.	PROPN
fis-105	149	25	materials	material	NOUN
fis-105	149	26	sci	sci	PROPN
fis-105	149	27	bonding	bonding	NOUN
fis-105	149	28	for	for	ADP
fis-105	149	29	m.	m.	NOUN
fis-105	149	30	wiemer	wiemer	NOUN
fis-105	149	31	,	,	PUNCT
fis-105	149	32	m	m	PROPN
fis-105	149	33	j.e	j.e	PROPN
fis-105	149	34	.	.	PROPN
fis-105	149	35	srawley	srawley	PROPN
fis-105	149	36	,	,	PUNCT
fis-105	149	37	i	i	PRON
fis-105	149	38	5	5	NUM
fis-105	149	39	(	(	PUNCT
fis-105	149	40	2011	2011	NUM
fis-105	149	41	)	)	PUNCT
fis-105	149	42	21	21	NUM
fis-105	149	43	-	-	SYM
fis-105	149	44	28	28	NUM
fis-105	149	45	;	;	PUNCT
fis-105	149	46	is	be	AUX
fis-105	149	47	calculated	calculate	VERB
fis-105	149	48	in	in	ADP
fis-105	149	49	addition	addition	NOUN
fis-105	149	50	t	t	PROPN
fis-105	149	51	ried	rie	VERB
fis-105	149	52	out	out	ADP
fis-105	149	53	in	in	ADP
fis-105	149	54	fu	fu	PROPN
fis-105	149	55	n	n	NOUN
fis-105	149	56	to	to	ADP
fis-105	149	57	microsys	microsys	PROPN
fis-105	149	58	t.	t.	PROPN
fis-105	149	59	otto	otto	PROPN
fis-105	149	60	,	,	PUNCT
fis-105	149	61	in	in	ADP
fis-105	149	62	:	:	PUNCT
fis-105	149	63	t	t	PROPN
fis-105	149	64	307	307	NUM
fis-105	149	65	.	.	PUNCT
fis-105	150	1	c.	c.	PROPN
fis-105	150	2	jia	jia	PROPN
fis-105	150	3	,	,	PUNCT
fis-105	150	4	d.	d.	PROPN
fis-105	150	5	wu	wu	PROPN
fis-105	150	6	,	,	PUNCT
fis-105	150	7	t.	t.	PROPN
fis-105	150	8	gessner	gessner	NOUN
fis-105	150	9	,	,	PUNCT
fis-105	150	10	r	r	NOUN
fis-105	150	11	wafer	wafer	NOUN
fis-105	150	12	bondi	bondi	PROPN
fis-105	150	13	hiller	hiller	PROPN
fis-105	150	14	,	,	PUNCT
fis-105	150	15	k.	k.	PROPN
fis-105	150	16	ka	ka	PROPN
fis-105	151	1	ence	ence	PROPN
fis-105	151	2	and	and	CCONJ
fis-105	151	3	eng	eng	PROPN
fis-105	151	4	mems	mems	PROPN
fis-105	151	5	and	and	CCONJ
fis-105	151	6	m.	m.	NOUN
fis-105	151	7	petzold	petzold	PROPN
fis-105	151	8	,	,	PUNCT
fis-105	151	9	el	el	PROPN
fis-105	151	10	int	int	PROPN
fis-105	151	11	.	.	PUNCT
fis-105	152	1	j.	j.	PROPN
fis-105	152	2	of	of	ADP
fis-105	152	3	frac	frac	PROPN
fis-105	152	4	;	;	PUNCT
fis-105	152	5	doi	doi	NOUN
fis-105	152	6	:	:	PUNCT
fis-105	152	7	10.3221	10.3221	NUM
fis-105	152	8	/	/	SYM
fis-105	152	9	ig	ig	PROPN
fis-105	152	10	d	d	NOUN
fis-105	152	11	using	use	VERB
fis-105	152	12	anoth	anoth	PROPN
fis-105	152	13	to	to	ADP
fis-105	152	14	the	the	DET
fis-105	152	15	nume	nume	PROPN
fis-105	152	16	uture	uture	PROPN
fis-105	152	17	.	.	PUNCT
fis-105	153	1	tem	tem	PROPN
fis-105	153	2	technolo	technolo	ADV
fis-105	153	3	the	the	DET
fis-105	153	4	world	world	NOUN
fis-105	153	5	o	o	PROPN
fis-105	153	6	uensch	uensch	PROPN
fis-105	153	7	,	,	PUNCT
fis-105	153	8	t.	t.	PROPN
fis-105	153	9	ge	ge	PROPN
fis-105	153	10	h.	h.	PROPN
fis-105	153	11	mischke	mischke	PROPN
fis-105	153	12	,	,	PUNCT
fis-105	153	13	ing	ing	PROPN
fis-105	153	14	,	,	PUNCT
fis-105	153	15	john	john	PROPN
fis-105	153	16	wile	wile	PROPN
fis-105	153	17	apser	apser	PROPN
fis-105	153	18	,	,	PUNCT
fis-105	153	19	h.	h.	PROPN
fis-105	153	20	seid	seid	PROPN
fis-105	153	21	gineering	gineering	NOUN
fis-105	153	22	,	,	PUNCT
fis-105	153	23	r2	r2	PROPN
fis-105	153	24	microelectro	microelectro	PROPN
fis-105	153	25	lectrochemica	lectrochemica	PROPN
fis-105	153	26	cture	cture	NOUN
fis-105	153	27	,	,	PUNCT
fis-105	153	28	16(4	16(4	NUM
fis-105	153	29	)	)	PUNCT
fis-105	153	30	(	(	PUNCT
fis-105	153	31	1	1	NUM
fis-105	153	32	gf	gf	NOUN
fis-105	153	33	-	-	NOUN
fis-105	153	34	esis.15.03	esis.15.03	NOUN
fis-105	153	35	her	her	PRON
fis-105	153	36	numeric	numeric	ADP
fis-105	153	37	a	a	DET
fis-105	153	38	eric	eric	PROPN
fis-105	153	39	calculatio	calculatio	PROPN
fis-105	153	40	ogy	ogy	NOUN
fis-105	153	41	.	.	PUNCT
fis-105	154	1	john	john	PROPN
fis-105	154	2	wil	wil	PROPN
fis-105	154	3	of	of	ADP
fis-105	154	4	electronic	electronic	ADJ
fis-105	154	5	essner	essner	NOUN
fis-105	154	6	,	,	PUNCT
fis-105	154	7	ecs	ecs	PROPN
fis-105	154	8	t	t	PROPN
fis-105	154	9	in	in	ADP
fis-105	154	10	:	:	PUNCT
fis-105	154	11	mni	mni	X
fis-105	154	12	pro	pro	X
fis-105	154	13	ey	ey	PROPN
fis-105	154	14	&	&	CCONJ
fis-105	154	15	sons	son	NOUN
fis-105	154	16	,	,	PUNCT
fis-105	154	17	lt	lt	PRON
fis-105	154	18	del	del	PROPN
fis-105	154	19	,	,	PUNCT
fis-105	154	20	j.	j.	PROPN
fis-105	154	21	bagdah	bagdah	PROPN
fis-105	154	22	5	5	NUM
fis-105	154	23	(	(	PUNCT
fis-105	154	24	1999	1999	NUM
fis-105	154	25	)	)	PUNCT
fis-105	154	26	1	1	NUM
fis-105	154	27	.	.	PUNCT
fis-105	154	28	onics	onic	NOUN
fis-105	154	29	,	,	PUNCT
fis-105	154	30	phd	phd	PROPN
fis-105	154	31	th	th	PROPN
fis-105	154	32	al	al	PROPN
fis-105	154	33	society	society	PROPN
fis-105	154	34	,	,	PUNCT
fis-105	154	35	(	(	PUNCT
fis-105	154	36	20	20	NUM
fis-105	154	37	1980	1980	NUM
fis-105	154	38	)	)	PUNCT
fis-105	154	39	359	359	NUM
fis-105	154	40	.	.	PUNCT
fis-105	155	1	approach	approach	NOUN
fis-105	155	2	,	,	PUNCT
fis-105	155	3	the	the	DET
fis-105	155	4	ons	ons	NOUN
fis-105	155	5	the	the	DET
fis-105	155	6	meas	meas	PROPN
fis-105	155	7	ley	ley	PROPN
fis-105	155	8	&	&	CCONJ
fis-105	155	9	sons	son	NOUN
fis-105	155	10	,	,	PUNCT
fis-105	155	11	l	l	NOUN
fis-105	155	12	packaging	packaging	NOUN
fis-105	155	13	an	an	DET
fis-105	155	14	transactions	transaction	NOUN
fis-105	155	15	,	,	PUNCT
fis-105	155	16	ceedings	ceeding	NOUN
fis-105	155	17	,	,	PUNCT
fis-105	155	18	da	da	PROPN
fis-105	155	19	td	td	NOUN
fis-105	155	20	.	.	PROPN
fis-105	155	21	,	,	PUNCT
fis-105	155	22	new	new	PROPN
fis-105	155	23	yor	yor	PROPN
fis-105	155	24	hn	hn	NOUN
fis-105	155	25	,	,	PUNCT
fis-105	155	26	m.	m.	NOUN
fis-105	155	27	petzol	petzol	VERB
fis-105	155	28	hesis	hesis	NOUN
fis-105	155	29	,	,	PUNCT
fis-105	155	30	helsink	helsink	NOUN
fis-105	155	31	001	001	NUM
fis-105	155	32	)	)	PUNCT
fis-105	155	33	218	218	NUM
fis-105	155	34	.	.	PUNCT
fis-105	156	1	e	e	NOUN
fis-105	156	2	energy	energy	NOUN
fis-105	156	3	relea	relea	NOUN
fis-105	156	4	surement	surement	NOUN
fis-105	156	5	of	of	ADP
fis-105	156	6	ltd	ltd	PROPN
fis-105	156	7	.	.	PROPN
fis-105	156	8	,	,	PUNCT
fis-105	156	9	(	(	PUNCT
fis-105	156	10	2008	2008	NUM
fis-105	156	11	)	)	PUNCT
fis-105	156	12	.	.	PUNCT
fis-105	157	1	nd	nd	PRON
fis-105	157	2	system	system	NOUN
fis-105	157	3	in	in	ADP
fis-105	157	4	,	,	PUNCT
fis-105	157	5	16(8	16(8	NUM
fis-105	157	6	)	)	PUNCT
fis-105	157	7	(	(	PUNCT
fis-105	157	8	2008	2008	NUM
fis-105	157	9	)	)	PUNCT
fis-105	157	10	rmstadt	rmstadt	NOUN
fis-105	157	11	,	,	PUNCT
fis-105	157	12	(	(	PUNCT
fis-105	157	13	201	201	NUM
fis-105	157	14	rk	rk	NOUN
fis-105	157	15	,	,	PUNCT
fis-105	157	16	(	(	PUNCT
fis-105	157	17	1999	1999	NUM
fis-105	157	18	)	)	PUNCT
fis-105	157	19	.	.	PUNCT
fis-105	158	1	d	d	X
fis-105	158	2	,	,	PUNCT
fis-105	158	3	materials	material	NOUN
fis-105	158	4	r	r	NOUN
fis-105	158	5	ki	ki	PROPN
fis-105	158	6	university	university	PROPN
fis-105	158	7	ase	ase	NOUN
fis-105	158	8	rate	rate	NOUN
fis-105	158	9	,	,	PUNCT
fis-105	158	10	to	to	PART
fis-105	158	11	ve	ve	VERB
fis-105	158	12	the	the	DET
fis-105	158	13	crack	crack	NOUN
fis-105	158	14	len	len	NOUN
fis-105	158	15	tegration	tegration	NOUN
fis-105	158	16	,	,	PUNCT
fis-105	158	17	ed	ed	NOUN
fis-105	158	18	81	81	NUM
fis-105	158	19	.	.	PUNCT
fis-105	158	20	10	10	NUM
fis-105	158	21	)	)	PUNCT
fis-105	158	22	66	66	NUM
fis-105	158	23	.	.	PUNCT
fis-105	159	1	research	research	NOUN
fis-105	159	2	soc	soc	PROPN
fis-105	159	3	y	y	PROPN
fis-105	159	4	of	of	ADP
fis-105	159	5	technol	technol	PROPN
fis-105	159	6	erify	erify	PROPN
fis-105	159	7	ngth	ngth	PROPN
fis-105	159	8	d.	d.	PROPN
fis-105	159	9	by	by	ADP
fis-105	159	10	ciety	ciety	PROPN
fis-105	159	11	,	,	PUNCT
fis-105	159	12	logy	logy	NOUN
fis-105	159	13	,	,	PUNCT
fis-105	159	14	http://dx.medra.org/10.3221/igf-esis.15.03&auth=true	http://dx.medra.org/10.3221/igf-esis.15.03&auth=true	PROPN
fis-105	159	15	http://www.gruppofrattura.it	http://www.gruppofrattura.it	X
fis-105	159	16	<	<	X
fis-105	159	17	<	<	X
fis-105	159	18	/ascii85encodepages	/ascii85encodepage	NOUN
fis-105	159	19	false	false	ADJ
fis-105	159	20	/allowtransparency	/allowtransparency	NOUN
fis-105	159	21	false	false	ADJ
fis-105	159	22	/autopositionepsfiles	/autopositionepsfile	NOUN
fis-105	159	23	true	true	ADJ
fis-105	159	24	/autorotatepages	/autorotatepage	NOUN
fis-105	159	25	/none	/none	PUNCT
fis-105	159	26	/binding	/binding	PUNCT
fis-105	159	27	/left	/left	ADJ
fis-105	160	1	/calgrayprofile	/calgrayprofile	VERB
fis-105	160	2	(	(	PUNCT
fis-105	160	3	dot	dot	NOUN
fis-105	160	4	gain	gain	NOUN
fis-105	160	5	20	20	NUM
fis-105	160	6	%	%	NOUN
fis-105	160	7	)	)	PUNCT
fis-105	160	8	/calrgbprofile	/calrgbprofile	PUNCT
fis-105	161	1	(	(	PUNCT
fis-105	161	2	srgb	srgb	PROPN
fis-105	161	3	iec61966	iec61966	NOUN
fis-105	161	4	-	-	PUNCT
fis-105	161	5	2.1	2.1	NUM
fis-105	161	6	)	)	PUNCT
fis-105	161	7	/calcmykprofile	/calcmykprofile	PUNCT
fis-105	162	1	(	(	PUNCT
fis-105	162	2	u.s	u.s	PROPN
fis-105	162	3	.	.	PROPN
fis-105	162	4	web	web	NOUN
fis-105	162	5	coated	coat	VERB
fis-105	162	6	\050swop\051	\050swop\051	ADJ
fis-105	162	7	v2	v2	NOUN
fis-105	162	8	)	)	PUNCT
fis-105	162	9	/srgbprofile	/srgbprofile	PUNCT
fis-105	162	10	(	(	PUNCT
fis-105	162	11	srgb	srgb	PROPN
fis-105	162	12	iec61966	iec61966	NOUN
fis-105	162	13	-	-	PUNCT
fis-105	162	14	2.1	2.1	NUM
fis-105	162	15	)	)	PUNCT
fis-105	162	16	/cannotembedfontpolicy	/cannotembedfontpolicy	PUNCT
fis-105	163	1	/error	/error	INTJ
fis-105	163	2	/compatibilitylevel	/compatibilitylevel	NOUN
fis-105	164	1	1.4	1.4	NUM
fis-105	164	2	/compressobjects	/compressobject	NOUN
fis-105	164	3	/tags	/tag	VERB
fis-105	164	4	/compresspages	/compresspage	NOUN
fis-105	164	5	true	true	ADJ
fis-105	164	6	/convertimagestoindexed	/convertimagestoindexed	ADJ
fis-105	164	7	true	true	ADJ
fis-105	164	8	/passthroughjpegimages	/passthroughjpegimage	NOUN
fis-105	164	9	true	true	ADJ
fis-105	164	10	/createjobticket	/createjobticket	NOUN
fis-105	164	11	false	false	ADJ
fis-105	164	12	/defaultrenderingintent	/defaultrenderingintent	NOUN
fis-105	164	13	/default	/default	PUNCT
fis-105	164	14	/detectblends	/detectblend	NOUN
fis-105	164	15	true	true	ADJ
fis-105	164	16	/detectcurves	/detectcurve	VERB
fis-105	165	1	0.0000	0.0000	NUM
fis-105	165	2	/colorconversionstrategy	/colorconversionstrategy	NOUN
fis-105	165	3	/cmyk	/cmyk	PUNCT
fis-105	166	1	/dothumbnails	/dothumbnail	VERB
fis-105	167	1	false	false	ADJ
fis-105	167	2	/embedallfonts	/embedallfont	NOUN
fis-105	167	3	true	true	ADJ
fis-105	167	4	/embedopentype	/embedopentype	PUNCT
fis-105	167	5	false	false	ADJ
fis-105	167	6	/parseiccprofilesincomments	/parseiccprofilesincomment	NOUN
fis-105	167	7	true	true	ADJ
fis-105	167	8	/embedjoboptions	/embedjoboption	NOUN
fis-105	167	9	true	true	ADJ
fis-105	167	10	/dscreportinglevel	/dscreportinglevel	NOUN
fis-105	167	11	0	0	NUM
fis-105	167	12	/emitdscwarnings	/emitdscwarning	NOUN
fis-105	167	13	false	false	ADJ
fis-105	167	14	/endpage	/endpage	NOUN
fis-105	167	15	-1	-1	NOUN
fis-105	167	16	/imagememory	/imagememory	NUM
fis-105	167	17	1048576	1048576	NUM
fis-105	167	18	/lockdistillerparams	/lockdistillerparams	NOUN
fis-105	167	19	false	false	ADJ
fis-105	167	20	/maxsubsetpct	/maxsubsetpct	ADJ
fis-105	167	21	100	100	NUM
fis-105	167	22	/optimize	/optimize	NOUN
fis-105	167	23	true	true	ADJ
fis-105	167	24	/opm	/opm	NOUN
fis-105	167	25	1	1	NUM
fis-105	167	26	/parsedsccomments	/parsedsccomment	NOUN
fis-105	167	27	true	true	ADJ
fis-105	167	28	/parsedsccommentsfordocinfo	/parsedsccommentsfordocinfo	VERB
fis-105	167	29	true	true	ADJ
fis-105	167	30	/preservecopypage	/preservecopypage	NOUN
fis-105	167	31	true	true	ADJ
fis-105	167	32	/preservedicmykvalues	/preservedicmykvalue	NOUN
fis-105	167	33	true	true	ADJ
fis-105	167	34	/preserveepsinfo	/preserveepsinfo	NOUN
fis-105	167	35	true	true	ADJ
fis-105	167	36	/preserveflatness	/preserveflatness	NOUN
fis-105	167	37	true	true	ADJ
fis-105	167	38	/preservehalftoneinfo	/preservehalftoneinfo	PUNCT
fis-105	167	39	false	false	ADJ
fis-105	167	40	/preserveopicomments	/preserveopicomment	NOUN
fis-105	167	41	true	true	ADJ
fis-105	167	42	/preserveoverprintsettings	/preserveoverprintsetting	NOUN
fis-105	167	43	true	true	ADJ
fis-105	167	44	/startpage	/startpage	NOUN
fis-105	167	45	1	1	NUM
fis-105	167	46	/subsetfonts	/subsetfont	NOUN
fis-105	167	47	true	true	ADJ
fis-105	167	48	/transferfunctioninfo	/transferfunctioninfo	PUNCT
fis-105	167	49	/apply	/apply	PUNCT
fis-105	167	50	/ucrandbginfo	/ucrandbginfo	PUNCT
fis-105	168	1	/preserve	/preserve	NOUN
fis-105	168	2	/useprologue	/useprologue	NOUN
fis-105	168	3	false	false	ADJ
fis-105	168	4	/colorsettingsfile	/colorsettingsfile	NOUN
fis-105	168	5	(	(	PUNCT
fis-105	168	6	)	)	PUNCT
fis-105	168	7	/alwaysembed	/alwaysembe	VERB
fis-105	168	8	[	[	PUNCT
fis-105	168	9	true	true	ADJ
fis-105	168	10	]	]	PUNCT
fis-105	168	11	/neverembed	/neverembed	PUNCT
fis-105	169	1	[	[	PUNCT
fis-105	169	2	true	true	ADJ
fis-105	169	3	]	]	PUNCT
fis-105	169	4	/antialiascolorimages	/antialiascolorimages	X
fis-105	169	5	false	false	ADJ
fis-105	169	6	/cropcolorimages	/cropcolorimages	PUNCT
fis-105	169	7	true	true	ADJ
fis-105	169	8	/colorimageminresolution	/colorimageminresolution	PUNCT
fis-105	169	9	300	300	NUM
fis-105	169	10	/colorimageminresolutionpolicy	/colorimageminresolutionpolicy	NOUN
fis-105	169	11	/ok	/ok	ADJ
fis-105	170	1	/downsamplecolorimages	/downsamplecolorimage	VERB
fis-105	171	1	true	true	ADJ
fis-105	171	2	/colorimagedownsampletype	/colorimagedownsampletype	PUNCT
fis-105	171	3	/bicubic	/bicubic	NOUN
fis-105	171	4	/colorimageresolution	/colorimageresolution	NOUN
fis-105	172	1	300	300	NUM
fis-105	172	2	/colorimagedepth	/colorimagedepth	PRON
fis-105	172	3	-1	-1	INTJ
fis-105	172	4	/colorimagemindownsampledepth	/colorimagemindownsampledepth	SYM
fis-105	172	5	1	1	NUM
fis-105	172	6	/colorimagedownsamplethreshold	/colorimagedownsamplethreshold	SYM
fis-105	172	7	1.50000	1.50000	NUM
fis-105	172	8	/encodecolorimages	/encodecolorimage	NOUN
fis-105	172	9	true	true	ADJ
fis-105	172	10	/colorimagefilter	/colorimagefilter	PUNCT
fis-105	172	11	/dctencode	/dctencode	PUNCT
fis-105	173	1	/autofiltercolorimages	/autofiltercolorimage	NOUN
fis-105	173	2	true	true	ADJ
fis-105	173	3	/colorimageautofilterstrategy	/colorimageautofilterstrategy	PUNCT
fis-105	173	4	/jpeg	/jpeg	PUNCT
fis-105	173	5	/coloracsimagedict	/coloracsimagedict	PUNCT
fis-105	174	1	<	<	X
fis-105	174	2	<	<	X
fis-105	174	3	/qfactor	/qfactor	NOUN
fis-105	174	4	0.15	0.15	NUM
fis-105	174	5	/hsamples	/hsample	NOUN
fis-105	175	1	[	[	X
fis-105	175	2	1	1	NUM
fis-105	175	3	1	1	NUM
fis-105	175	4	1	1	NUM
fis-105	175	5	1	1	NUM
fis-105	175	6	]	]	PUNCT
fis-105	175	7	/vsamples	/vsample	NOUN
fis-105	176	1	[	[	X
fis-105	176	2	1	1	NUM
fis-105	176	3	1	1	NUM
fis-105	176	4	1	1	NUM
fis-105	176	5	1	1	NUM
fis-105	176	6	]	]	PUNCT
fis-105	176	7	>	>	PUNCT
fis-105	176	8	>	>	X
fis-105	176	9	/colorimagedict	/colorimagedict	PUNCT
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fis-105	177	2	<	<	X
fis-105	177	3	/qfactor	/qfactor	NOUN
fis-105	177	4	0.15	0.15	NUM
fis-105	177	5	/hsamples	/hsample	NOUN
fis-105	178	1	[	[	X
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fis-105	178	3	1	1	NUM
fis-105	178	4	1	1	NUM
fis-105	178	5	1	1	NUM
fis-105	178	6	]	]	PUNCT
fis-105	178	7	/vsamples	/vsample	NOUN
fis-105	179	1	[	[	X
fis-105	179	2	1	1	NUM
fis-105	179	3	1	1	NUM
fis-105	179	4	1	1	NUM
fis-105	179	5	1	1	NUM
fis-105	179	6	]	]	PUNCT
fis-105	179	7	>	>	PUNCT
fis-105	179	8	>	>	X
fis-105	179	9	/jpeg2000coloracsimagedict	/jpeg2000coloracsimagedict	PUNCT
fis-105	180	1	<	<	X
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fis-105	180	3	/tilewidth	/tilewidth	PUNCT
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fis-105	180	6	256	256	NUM
fis-105	180	7	/quality	/quality	NOUN
fis-105	180	8	30	30	NUM
fis-105	180	9	>	>	PUNCT
fis-105	180	10	>	>	X
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fis-105	180	20	>	>	PUNCT
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fis-105	180	25	true	true	ADJ
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fis-105	180	27	300	300	NUM
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fis-105	180	29	/ok	/ok	ADJ
fis-105	180	30	/downsamplegrayimages	/downsamplegrayimages	PUNCT
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fis-105	181	4	/grayimageresolution	/grayimageresolution	NOUN
fis-105	181	5	300	300	NUM
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fis-105	181	8	/grayimagemindownsampledepth	/grayimagemindownsampledepth	PUNCT
fis-105	182	1	2	2	NUM
fis-105	182	2	/grayimagedownsamplethreshold	/grayimagedownsamplethreshold	NUM
fis-105	182	3	1.50000	1.50000	NUM
fis-105	182	4	/encodegrayimages	/encodegrayimage	NOUN
fis-105	182	5	true	true	ADJ
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fis-105	183	4	/jpeg	/jpeg	PUNCT
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fis-105	185	3	1	1	NUM
fis-105	185	4	1	1	NUM
fis-105	185	5	1	1	NUM
fis-105	185	6	]	]	PUNCT
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fis-105	186	2	1	1	NUM
fis-105	186	3	1	1	NUM
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fis-105	186	5	1	1	NUM
fis-105	186	6	]	]	PUNCT
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fis-105	188	4	1	1	NUM
fis-105	188	5	1	1	NUM
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fis-105	189	7	>	>	X
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fis-105	201	3	>	>	X
fis-105	201	4	/cze	/cze	PUNCT
fis-105	202	1	<	<	X
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fis-105	202	3	>	>	X
fis-105	202	4	/dan	/dan	PUNCT
fis-105	203	1	<	<	X
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fis-105	204	2	>	>	X
fis-105	204	3	/deu	/deu	PUNCT
fis-105	204	4	<	<	X
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fis-105	204	6	>	>	X
fis-105	204	7	/esp	/esp	PUNCT
fis-105	204	8	<	<	X
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fis-105	204	10	>	>	X
fis-105	204	11	/eti	/eti	X
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fis-105	205	3	>	>	X
fis-105	205	4	/fra	/fra	PUNCT
fis-105	206	1	<	<	X
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fis-105	206	3	>	>	X
fis-105	206	4	/gre	/gre	PUNCT
fis-105	206	5	<	<	X
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fis-105	206	7	>	>	X
fis-105	206	8	/heb	/heb	X
fis-105	206	9	<	<	X
fis-105	206	10	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	X
fis-105	206	11	>	>	X
fis-105	206	12	/hrv	/hrv	PROPN
fis-105	207	1	(	(	PUNCT
fis-105	207	2	za	za	PROPN
fis-105	207	3	stvaranje	stvaranje	PROPN
fis-105	207	4	adobe	adobe	PROPN
fis-105	207	5	pdf	pdf	PROPN
fis-105	207	6	dokumenata	dokumenata	PROPN
fis-105	207	7	najpogodnijih	najpogodnijih	PROPN
fis-105	207	8	za	za	PROPN
fis-105	207	9	visokokvalitetni	visokokvalitetni	VERB
fis-105	207	10	ispis	ispis	ADJ
fis-105	207	11	prije	prije	NOUN
fis-105	207	12	tiskanja	tiskanja	PROPN
fis-105	207	13	koristite	koristite	PROPN
fis-105	207	14	ove	ove	NOUN
fis-105	207	15	postavke	postavke	NOUN
fis-105	207	16	.	.	PUNCT
fis-105	208	1	stvoreni	stvoreni	ADJ
fis-105	208	2	pdf	pdf	NOUN
fis-105	208	3	dokumenti	dokumenti	PROPN
fis-105	208	4	mogu	mogu	PROPN
fis-105	208	5	se	se	X
fis-105	208	6	otvoriti	otvoriti	PROPN
fis-105	208	7	acrobat	acrobat	PROPN
fis-105	209	1	i	i	PRON
fis-105	209	2	adobe	adobe	PROPN
fis-105	209	3	reader	reader	PROPN
fis-105	209	4	5.0	5.0	NUM
fis-105	209	5	i	i	PRON
fis-105	209	6	kasnijim	kasnijim	VERB
fis-105	209	7	verzijama	verzijama	NOUN
fis-105	209	8	.	.	PUNCT
fis-105	209	9	)	)	PUNCT
fis-105	210	1	/hun	/hun	PUNCT
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fis-105	211	3	>	>	X
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fis-105	212	3	>	>	X
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fis-105	213	3	>	>	X
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fis-105	214	3	>	>	X
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fis-105	215	3	>	>	X
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fis-105	216	3	>	>	X
fis-105	216	4	/nld	/nld	PUNCT
fis-105	217	1	(	(	PUNCT
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fis-105	217	3	deze	deze	PROPN
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fis-105	217	6	adobe	adobe	PROPN
fis-105	217	7	pdf	pdf	PROPN
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fis-105	220	3	>	>	X
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fis-105	221	3	>	>	X
fis-105	221	4	/ptb	/ptb	PROPN
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fis-105	221	11	>	>	X
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fis-105	221	16	/sky	/sky	PUNCT
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fis-105	222	7	>	>	X
fis-105	222	8	/suo	/suo	PROPN
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fis-105	223	3	>	>	X
fis-105	223	4	/sve	/sve	PROPN
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fis-105	223	7	>	>	X
fis-105	223	8	/tur	/tur	X
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fis-105	223	11	>	>	X
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fis-105	223	15	>	>	X
fis-105	223	16	/enu	/enu	PUNCT
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fis-105	223	18	use	use	VERB
fis-105	223	19	these	these	DET
fis-105	223	20	settings	setting	NOUN
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fis-105	223	23	adobe	adobe	PROPN
fis-105	223	24	pdf	pdf	PROPN
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fis-105	223	26	best	well	ADV
fis-105	223	27	suited	suit	VERB
fis-105	223	28	for	for	ADP
fis-105	223	29	high	high	ADJ
fis-105	223	30	-	-	PUNCT
fis-105	223	31	quality	quality	NOUN
fis-105	223	32	prepress	prepress	NOUN
fis-105	223	33	printing	printing	NOUN
fis-105	223	34	.	.	PUNCT
fis-105	224	1	created	create	VERB
fis-105	224	2	pdf	pdf	NOUN
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fis-105	224	4	can	can	AUX
fis-105	224	5	be	be	AUX
fis-105	224	6	opened	open	VERB
fis-105	224	7	with	with	ADP
fis-105	224	8	acrobat	acrobat	PROPN
fis-105	224	9	and	and	CCONJ
fis-105	224	10	adobe	adobe	PROPN
fis-105	224	11	reader	reader	PROPN
fis-105	224	12	5.0	5.0	NUM
fis-105	224	13	and	and	CCONJ
fis-105	224	14	later	later	ADV
fis-105	224	15	.	.	PUNCT
fis-105	224	16	)	)	PUNCT
fis-105	225	1	>	>	PUNCT
fis-105	225	2	>	>	X
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fis-105	226	10	)	)	PUNCT
fis-105	226	11	]	]	PUNCT
fis-105	227	1	/othernamespaces	/othernamespace	VERB
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fis-105	227	5	/asreaderspreads	/asreaderspreads	X
fis-105	227	6	false	false	ADJ
fis-105	227	7	/cropimagestoframes	/cropimagestoframe	NOUN
fis-105	227	8	true	true	ADJ
fis-105	227	9	/errorcontrol	/errorcontrol	NOUN
fis-105	228	1	/warnandcontinue	/warnandcontinue	PUNCT
fis-105	228	2	/flattenerignorespreadoverrides	/flattenerignorespreadoverride	NOUN
fis-105	228	3	false	false	ADJ
fis-105	228	4	/includeguidesgrids	/includeguidesgrid	NOUN
fis-105	228	5	false	false	ADJ
fis-105	228	6	/includenonprinting	/includenonprinting	NOUN
fis-105	228	7	false	false	ADJ
fis-105	228	8	/includeslug	/includeslug	INTJ
fis-105	228	9	false	false	ADJ
fis-105	228	10	/namespace	/namespace	NOUN
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fis-105	229	10	)	)	PUNCT
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fis-105	229	12	/omitplacedbitmaps	/omitplacedbitmaps	PUNCT
fis-105	230	1	false	false	ADJ
fis-105	230	2	/omitplacedeps	/omitplacedeps	INTJ
fis-105	230	3	false	false	ADJ
fis-105	230	4	/omitplacedpdf	/omitplacedpdf	PUNCT
fis-105	230	5	false	false	ADJ
fis-105	230	6	/simulateoverprint	/simulateoverprint	NOUN
fis-105	230	7	/legacy	/legacy	PUNCT
fis-105	231	1	>	>	PUNCT
fis-105	231	2	>	>	X
fis-105	232	1	<	<	X
fis-105	232	2	<	<	X
fis-105	232	3	/addbleedmarks	/addbleedmarks	X
fis-105	232	4	false	false	ADJ
fis-105	232	5	/addcolorbars	/addcolorbars	INTJ
fis-105	232	6	false	false	ADJ
fis-105	232	7	/addcropmarks	/addcropmarks	PUNCT
fis-105	232	8	false	false	ADJ
fis-105	232	9	/addpageinfo	/addpageinfo	INTJ
fis-105	232	10	false	false	ADJ
fis-105	232	11	/addregmarks	/addregmark	NOUN
fis-105	232	12	false	false	ADJ
fis-105	232	13	/convertcolors	/convertcolor	NOUN
fis-105	232	14	/converttocmyk	/converttocmyk	INTJ
fis-105	232	15	/destinationprofilename	/destinationprofilename	PUNCT
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fis-105	232	20	/downsample16bitimages	/downsample16bitimage	NOUN
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fis-105	234	2	/generatestructure	/generatestructure	PUNCT
fis-105	234	3	false	false	ADJ
fis-105	234	4	/includebookmarks	/includebookmark	NOUN
fis-105	234	5	false	false	ADJ
fis-105	234	6	/includehyperlinks	/includehyperlinks	INTJ
fis-105	234	7	false	false	ADJ
fis-105	234	8	/includeinteractive	/includeinteractive	ADJ
fis-105	234	9	false	false	ADJ
fis-105	234	10	/includelayers	/includelayer	NOUN
fis-105	234	11	false	false	ADJ
fis-105	234	12	/includeprofiles	/includeprofiles	INTJ
fis-105	234	13	false	false	ADJ
fis-105	234	14	/multimediahandling	/multimediahandling	NOUN
fis-105	235	1	/useobjectsettings	/useobjectsettings	PRON
fis-105	236	1	/namespace	/namespace	PUNCT
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fis-105	237	7	)	)	PUNCT
fis-105	237	8	(	(	PUNCT
fis-105	237	9	2.0	2.0	NUM
fis-105	237	10	)	)	PUNCT
fis-105	237	11	]	]	PUNCT
fis-105	238	1	/pdfxoutputintentprofileselector	/pdfxoutputintentprofileselector	INTJ
fis-105	238	2	/documentcmyk	/documentcmyk	PUNCT
fis-105	239	1	/preserveediting	/preserveedite	VERB
fis-105	239	2	true	true	ADJ
fis-105	239	3	/untaggedcmykhandling	/untaggedcmykhandling	NOUN
fis-105	239	4	/leaveuntagged	/leaveuntagge	VERB
fis-105	239	5	/untaggedrgbhandling	/untaggedrgbhandling	NOUN
fis-105	239	6	/usedocumentprofile	/usedocumentprofile	INTJ
fis-105	239	7	/usedocumentbleed	/usedocumentbleed	NOUN
fis-105	240	1	false	false	ADJ
fis-105	240	2	>	>	PUNCT
fis-105	240	3	>	>	X
fis-105	240	4	]	]	PUNCT
fis-105	240	5	>	>	PUNCT
fis-105	240	6	>	>	X
fis-105	240	7	setdistillerparams	setdistillerparam	NOUN
fis-105	241	1	<	<	X
fis-105	241	2	<	<	X
fis-105	241	3	/hwresolution	/hwresolution	NOUN
fis-105	242	1	[	[	X
fis-105	242	2	2400	2400	NUM
fis-105	242	3	2400	2400	NUM
fis-105	242	4	]	]	PUNCT
fis-105	242	5	/pagesize	/pagesize	X
fis-105	243	1	[	[	X
fis-105	243	2	612.000	612.000	NUM
fis-105	243	3	792.000	792.000	NUM
fis-105	243	4	]	]	PUNCT
fis-105	243	5	>	>	PUNCT
fis-105	243	6	>	>	X
fis-105	243	7	setpagedevice	setpagedevice	PROPN