id	sid	tid	token	lemma	pos
fis-1265	1	1	microsoft	microsoft	PROPN
fis-1265	1	2	word	word	NOUN
fis-1265	1	3	numero_29_art_29	numero_29_art_29	INTJ
fis-1265	1	4	v.	v.	ADP
fis-1265	1	5	zega	zega	PROPN
fis-1265	1	6	et	et	PROPN
fis-1265	1	7	alii	alii	PROPN
fis-1265	1	8	,	,	PUNCT
fis-1265	1	9	frattura	frattura	PROPN
fis-1265	1	10	ed	ed	PROPN
fis-1265	1	11	integrità	integrità	PROPN
fis-1265	1	12	strutturale	strutturale	PROPN
fis-1265	1	13	,	,	PUNCT
fis-1265	1	14	29	29	NUM
fis-1265	1	15	(	(	PUNCT
fis-1265	1	16	2014	2014	NUM
fis-1265	1	17	)	)	PUNCT
fis-1265	1	18	334	334	NUM
fis-1265	1	19	-	-	SYM
fis-1265	1	20	342	342	NUM
fis-1265	1	21	;	;	PUNCT
fis-1265	1	22	doi	doi	NOUN
fis-1265	1	23	:	:	PUNCT
fis-1265	1	24	10.3221	10.3221	NUM
fis-1265	1	25	/	/	SYM
fis-1265	1	26	igf	igf	PROPN
fis-1265	1	27	-	-	PUNCT
fis-1265	1	28	esis.29.29	esis.29.29	PROPN
fis-1265	1	29	334	334	NUM
fis-1265	1	30	focussed	focusse	VERB
fis-1265	1	31	on	on	ADP
fis-1265	1	32	:	:	PUNCT
fis-1265	1	33	computational	computational	ADJ
fis-1265	1	34	mechanics	mechanic	NOUN
fis-1265	1	35	and	and	CCONJ
fis-1265	1	36	mechanics	mechanic	NOUN
fis-1265	1	37	of	of	ADP
fis-1265	1	38	materials	material	NOUN
fis-1265	1	39	in	in	ADP
fis-1265	1	40	italy	italy	PROPN
fis-1265	1	41	integrated	integrate	VERB
fis-1265	1	42	structure	structure	NOUN
fis-1265	1	43	for	for	ADP
fis-1265	1	44	a	a	DET
fis-1265	1	45	resonant	resonant	ADJ
fis-1265	1	46	micro	micro	NOUN
fis-1265	1	47	-	-	NOUN
fis-1265	1	48	gyroscope	gyroscope	NOUN
fis-1265	1	49	and	and	CCONJ
fis-1265	1	50	accelerometer	accelerometer	NOUN
fis-1265	1	51	v.	v.	ADP
fis-1265	1	52	zega	zega	PROPN
fis-1265	1	53	,	,	PUNCT
fis-1265	1	54	c.	c.	PROPN
fis-1265	1	55	comi	comi	NOUN
fis-1265	1	56	,	,	PUNCT
fis-1265	1	57	a.	a.	PROPN
fis-1265	1	58	corigliano	corigliano	PROPN
fis-1265	1	59	department	department	NOUN
fis-1265	1	60	of	of	ADP
fis-1265	1	61	civil	civil	ADJ
fis-1265	1	62	and	and	CCONJ
fis-1265	1	63	environmental	environmental	ADJ
fis-1265	1	64	engineering	engineering	NOUN
fis-1265	1	65	,	,	PUNCT
fis-1265	1	66	politecnico	politecnico	PROPN
fis-1265	1	67	di	di	X
fis-1265	1	68	milano	milano	PROPN
fis-1265	1	69	,	,	PUNCT
fis-1265	1	70	piazza	piazza	PROPN
fis-1265	1	71	leonardo	leonardo	PROPN
fis-1265	1	72	da	da	PROPN
fis-1265	1	73	vinci	vinci	PROPN
fis-1265	1	74	32	32	NUM
fis-1265	1	75	,	,	PUNCT
fis-1265	1	76	20133	20133	NUM
fis-1265	1	77	milano	milano	PROPN
fis-1265	1	78	,	,	PUNCT
fis-1265	1	79	italy	italy	PROPN
fis-1265	1	80	.	.	PUNCT
fis-1265	1	81	valentina.zega@polimi.it	valentina.zega@polimi.it	PROPN
fis-1265	1	82	,	,	PUNCT
fis-1265	1	83	claudia.comi@polimi.it	claudia.comi@polimi.it	PROPN
fis-1265	1	84	,	,	PUNCT
fis-1265	1	85	alberto.corigliano@polimi.it	alberto.corigliano@polimi.it	PROPN
fis-1265	1	86	c.	c.	PROPN
fis-1265	1	87	valzasina	valzasina	NOUN
fis-1265	1	88	ams	ams	PROPN
fis-1265	1	89	division	division	PROPN
fis-1265	1	90	,	,	PUNCT
fis-1265	1	91	stmicroelectronics	stmicroelectronic	NOUN
fis-1265	1	92	,	,	PUNCT
fis-1265	1	93	via	via	ADP
fis-1265	1	94	tolomeo	tolomeo	NOUN
fis-1265	1	95	1	1	NUM
fis-1265	1	96	,	,	PUNCT
fis-1265	1	97	20010	20010	NUM
fis-1265	1	98	cornaredo	cornaredo	NOUN
fis-1265	1	99	,	,	PUNCT
fis-1265	1	100	(	(	PUNCT
fis-1265	1	101	milano	milano	PROPN
fis-1265	1	102	)	)	PUNCT
fis-1265	1	103	,	,	PUNCT
fis-1265	1	104	italy	italy	PROPN
fis-1265	1	105	carlo.valzasina@st.com	carlo.valzasina@st.com	PROPN
fis-1265	1	106	abstract	abstract	PROPN
fis-1265	1	107	.	.	PUNCT
fis-1265	2	1	this	this	DET
fis-1265	2	2	paper	paper	NOUN
fis-1265	2	3	presents	present	VERB
fis-1265	2	4	the	the	DET
fis-1265	2	5	study	study	NOUN
fis-1265	2	6	of	of	ADP
fis-1265	2	7	the	the	DET
fis-1265	2	8	mechanical	mechanical	ADJ
fis-1265	2	9	behavior	behavior	NOUN
fis-1265	2	10	of	of	ADP
fis-1265	2	11	a	a	DET
fis-1265	2	12	microstructure	microstructure	NOUN
fis-1265	2	13	designed	design	VERB
fis-1265	2	14	to	to	PART
fis-1265	2	15	detect	detect	VERB
fis-1265	2	16	acceleration	acceleration	NOUN
fis-1265	2	17	and	and	CCONJ
fis-1265	2	18	angular	angular	ADJ
fis-1265	2	19	velocity	velocity	NOUN
fis-1265	2	20	simultaneously	simultaneously	ADV
fis-1265	2	21	.	.	PUNCT
fis-1265	3	1	the	the	DET
fis-1265	3	2	new	new	ADJ
fis-1265	3	3	resonant	resonant	ADJ
fis-1265	3	4	micro	micro	NOUN
fis-1265	3	5	-	-	NOUN
fis-1265	3	6	sensor	sensor	NOUN
fis-1265	3	7	proposed	propose	VERB
fis-1265	3	8	,	,	PUNCT
fis-1265	3	9	fabricated	fabricate	VERB
fis-1265	3	10	by	by	ADP
fis-1265	3	11	the	the	DET
fis-1265	3	12	thelma	thelma	PROPN
fis-1265	3	13	©	©	PROPN
fis-1265	3	14	surface	surface	NOUN
fis-1265	3	15	-	-	PUNCT
fis-1265	3	16	micromachining	micromachine	VERB
fis-1265	3	17	technique	technique	NOUN
fis-1265	3	18	,	,	PUNCT
fis-1265	4	1	bases	basis	NOUN
fis-1265	4	2	detection	detection	NOUN
fis-1265	4	3	of	of	ADP
fis-1265	4	4	two	two	NUM
fis-1265	4	5	components	component	NOUN
fis-1265	4	6	of	of	ADP
fis-1265	4	7	external	external	ADJ
fis-1265	4	8	acceleration	acceleration	NOUN
fis-1265	4	9	(	(	PUNCT
fis-1265	4	10	one	one	NUM
fis-1265	4	11	in	in	ADP
fis-1265	4	12	-	-	PUNCT
fis-1265	4	13	plane	plane	NOUN
fis-1265	4	14	component	component	NOUN
fis-1265	4	15	and	and	CCONJ
fis-1265	4	16	one	one	NUM
fis-1265	4	17	out	out	ADV
fis-1265	4	18	-	-	PUNCT
fis-1265	4	19	of	of	ADP
fis-1265	4	20	plane	plane	NOUN
fis-1265	4	21	component	component	NOUN
fis-1265	4	22	)	)	PUNCT
fis-1265	4	23	and	and	CCONJ
fis-1265	4	24	two	two	NUM
fis-1265	4	25	components	component	NOUN
fis-1265	4	26	of	of	ADP
fis-1265	4	27	angular	angular	ADJ
fis-1265	4	28	velocity	velocity	NOUN
fis-1265	4	29	(	(	PUNCT
fis-1265	4	30	roll	roll	NOUN
fis-1265	4	31	and	and	CCONJ
fis-1265	4	32	yaw	yaw	NOUN
fis-1265	4	33	)	)	PUNCT
fis-1265	4	34	on	on	ADP
fis-1265	4	35	the	the	DET
fis-1265	4	36	variation	variation	NOUN
fis-1265	4	37	of	of	ADP
fis-1265	4	38	frequency	frequency	NOUN
fis-1265	4	39	of	of	ADP
fis-1265	4	40	several	several	ADJ
fis-1265	4	41	elements	element	NOUN
fis-1265	4	42	set	set	VERB
fis-1265	4	43	in	in	ADP
fis-1265	4	44	resonance	resonance	NOUN
fis-1265	4	45	.	.	PUNCT
fis-1265	5	1	the	the	DET
fis-1265	5	2	device	device	NOUN
fis-1265	5	3	,	,	PUNCT
fis-1265	5	4	despite	despite	SCONJ
fis-1265	5	5	its	its	PRON
fis-1265	5	6	small	small	ADJ
fis-1265	5	7	dimensions	dimension	NOUN
fis-1265	5	8	,	,	PUNCT
fis-1265	5	9	provides	provide	VERB
fis-1265	5	10	a	a	DET
fis-1265	5	11	differential	differential	ADJ
fis-1265	5	12	decoupled	decouple	VERB
fis-1265	5	13	detection	detection	NOUN
fis-1265	5	14	of	of	ADP
fis-1265	5	15	four	four	NUM
fis-1265	5	16	external	external	ADJ
fis-1265	5	17	quantities	quantity	NOUN
fis-1265	5	18	thanks	thank	NOUN
fis-1265	5	19	to	to	ADP
fis-1265	5	20	the	the	DET
fis-1265	5	21	presence	presence	NOUN
fis-1265	5	22	of	of	ADP
fis-1265	5	23	four	four	NUM
fis-1265	5	24	slender	slender	ADJ
fis-1265	5	25	beams	beam	NOUN
fis-1265	5	26	resonating	resonate	VERB
fis-1265	5	27	in	in	ADP
fis-1265	5	28	bending	bending	NOUN
fis-1265	5	29	and	and	CCONJ
fis-1265	5	30	four	four	NUM
fis-1265	5	31	torsional	torsional	ADJ
fis-1265	5	32	resonators	resonator	NOUN
fis-1265	5	33	.	.	PUNCT
fis-1265	6	1	keywords	keyword	NOUN
fis-1265	6	2	.	.	PUNCT
fis-1265	7	1	mems	mem	NOUN
fis-1265	7	2	;	;	PUNCT
fis-1265	7	3	gyroscope	gyroscope	NOUN
fis-1265	7	4	;	;	PUNCT
fis-1265	7	5	accelerometer	accelerometer	NOUN
fis-1265	7	6	;	;	PUNCT
fis-1265	7	7	resonators	resonator	NOUN
fis-1265	7	8	.	.	PUNCT
fis-1265	8	1	introduction	introduction	NOUN
fis-1265	8	2	icro	icro	PROPN
fis-1265	8	3	-	-	ADJ
fis-1265	8	4	electro	electro	ADJ
fis-1265	8	5	-	-	PUNCT
fis-1265	8	6	mechanical	mechanical	ADJ
fis-1265	8	7	systems	system	NOUN
fis-1265	8	8	(	(	PUNCT
fis-1265	8	9	mems	mem	NOUN
fis-1265	8	10	)	)	PUNCT
fis-1265	8	11	or	or	CCONJ
fis-1265	8	12	microsystems	microsystem	NOUN
fis-1265	8	13	,	,	PUNCT
fis-1265	8	14	are	be	AUX
fis-1265	8	15	micro	micro	ADJ
fis-1265	8	16	-	-	ADJ
fis-1265	8	17	sized	sized	ADJ
fis-1265	8	18	devices	device	NOUN
fis-1265	8	19	(	(	PUNCT
fis-1265	8	20	see	see	VERB
fis-1265	8	21	e.g.	e.g.	ADV
fis-1265	8	22	[	[	X
fis-1265	8	23	1	1	NUM
fis-1265	8	24	,	,	PUNCT
fis-1265	8	25	2	2	NUM
fis-1265	8	26	]	]	PUNCT
fis-1265	8	27	)	)	PUNCT
fis-1265	8	28	nowadays	nowadays	ADV
fis-1265	8	29	largely	largely	ADV
fis-1265	8	30	used	use	VERB
fis-1265	8	31	in	in	ADP
fis-1265	8	32	the	the	DET
fis-1265	8	33	consumer	consumer	NOUN
fis-1265	8	34	and	and	CCONJ
fis-1265	8	35	automotive	automotive	ADJ
fis-1265	8	36	market	market	NOUN
fis-1265	8	37	.	.	PUNCT
fis-1265	9	1	their	their	PRON
fis-1265	9	2	diffusion	diffusion	NOUN
fis-1265	9	3	is	be	AUX
fis-1265	9	4	exponentially	exponentially	ADV
fis-1265	9	5	increasing	increase	VERB
fis-1265	9	6	in	in	ADP
fis-1265	9	7	the	the	DET
fis-1265	9	8	biomedical	biomedical	ADJ
fis-1265	9	9	market	market	NOUN
fis-1265	9	10	;	;	PUNCT
fis-1265	9	11	their	their	PRON
fis-1265	9	12	use	use	NOUN
fis-1265	9	13	is	be	AUX
fis-1265	9	14	also	also	ADV
fis-1265	9	15	growing	grow	VERB
fis-1265	9	16	in	in	ADP
fis-1265	9	17	structural	structural	ADJ
fis-1265	9	18	engineering	engineering	NOUN
fis-1265	9	19	as	as	ADP
fis-1265	9	20	efficient	efficient	ADJ
fis-1265	9	21	and	and	CCONJ
fis-1265	9	22	low	low	ADJ
fis-1265	9	23	-	-	PUNCT
fis-1265	9	24	cost	cost	NOUN
fis-1265	9	25	devices	device	NOUN
fis-1265	9	26	for	for	ADP
fis-1265	9	27	structural	structural	ADJ
fis-1265	9	28	health	health	NOUN
fis-1265	9	29	monitoring	monitoring	NOUN
fis-1265	9	30	.	.	PUNCT
fis-1265	10	1	typical	typical	ADJ
fis-1265	10	2	examples	example	NOUN
fis-1265	10	3	of	of	ADP
fis-1265	10	4	widely	widely	ADV
fis-1265	10	5	diffused	diffuse	VERB
fis-1265	10	6	mems	mem	NOUN
fis-1265	10	7	are	be	AUX
fis-1265	10	8	accelerometers	accelerometer	NOUN
fis-1265	10	9	,	,	PUNCT
fis-1265	10	10	gyroscopes	gyroscope	NOUN
fis-1265	10	11	,	,	PUNCT
fis-1265	10	12	pressure	pressure	NOUN
fis-1265	10	13	sensors	sensor	NOUN
fis-1265	10	14	.	.	PUNCT
fis-1265	11	1	the	the	DET
fis-1265	11	2	fast	fast	ADJ
fis-1265	11	3	evolution	evolution	NOUN
fis-1265	11	4	of	of	ADP
fis-1265	11	5	mems	mem	NOUN
fis-1265	11	6	technology	technology	NOUN
fis-1265	11	7	is	be	AUX
fis-1265	11	8	mainly	mainly	ADV
fis-1265	11	9	driven	drive	VERB
fis-1265	11	10	by	by	ADP
fis-1265	11	11	the	the	DET
fis-1265	11	12	attempt	attempt	NOUN
fis-1265	11	13	to	to	PART
fis-1265	11	14	reduce	reduce	VERB
fis-1265	11	15	the	the	DET
fis-1265	11	16	total	total	ADJ
fis-1265	11	17	size	size	NOUN
fis-1265	11	18	of	of	ADP
fis-1265	11	19	the	the	DET
fis-1265	11	20	microsystem	microsystem	NOUN
fis-1265	11	21	,	,	PUNCT
fis-1265	11	22	while	while	SCONJ
fis-1265	11	23	keeping	keep	VERB
fis-1265	11	24	the	the	DET
fis-1265	11	25	power	power	NOUN
fis-1265	11	26	consumption	consumption	NOUN
fis-1265	11	27	low	low	ADJ
fis-1265	11	28	and	and	CCONJ
fis-1265	11	29	the	the	DET
fis-1265	11	30	sensitivity	sensitivity	NOUN
fis-1265	11	31	high	high	ADJ
fis-1265	11	32	enough	enough	ADV
fis-1265	11	33	for	for	ADP
fis-1265	11	34	the	the	DET
fis-1265	11	35	specific	specific	ADJ
fis-1265	11	36	applications	application	NOUN
fis-1265	11	37	.	.	PUNCT
fis-1265	12	1	to	to	PART
fis-1265	12	2	reduce	reduce	VERB
fis-1265	12	3	the	the	DET
fis-1265	12	4	cost	cost	NOUN
fis-1265	12	5	and	and	CCONJ
fis-1265	12	6	the	the	DET
fis-1265	12	7	dimensions	dimension	NOUN
fis-1265	12	8	required	require	VERB
fis-1265	12	9	to	to	PART
fis-1265	12	10	embed	embed	VERB
fis-1265	12	11	several	several	ADJ
fis-1265	12	12	sensors	sensor	NOUN
fis-1265	12	13	for	for	ADP
fis-1265	12	14	detecting	detect	VERB
fis-1265	12	15	the	the	DET
fis-1265	12	16	various	various	ADJ
fis-1265	12	17	external	external	ADJ
fis-1265	12	18	quantities	quantity	NOUN
fis-1265	12	19	,	,	PUNCT
fis-1265	12	20	there	there	PRON
fis-1265	12	21	is	be	VERB
fis-1265	12	22	a	a	DET
fis-1265	12	23	trend	trend	NOUN
fis-1265	12	24	to	to	PART
fis-1265	12	25	integrate	integrate	VERB
fis-1265	12	26	a	a	DET
fis-1265	12	27	number	number	NOUN
fis-1265	12	28	of	of	ADP
fis-1265	12	29	detection	detection	NOUN
fis-1265	12	30	structures	structure	NOUN
fis-1265	12	31	within	within	ADP
fis-1265	12	32	the	the	DET
fis-1265	12	33	same	same	ADJ
fis-1265	12	34	device	device	NOUN
fis-1265	12	35	.	.	PUNCT
fis-1265	13	1	several	several	ADJ
fis-1265	13	2	proposals	proposal	NOUN
fis-1265	13	3	consists	consist	VERB
fis-1265	13	4	in	in	ADP
fis-1265	13	5	integrating	integrate	VERB
fis-1265	13	6	in	in	ADP
fis-1265	13	7	a	a	DET
fis-1265	13	8	single	single	ADJ
fis-1265	13	9	die	die	VERB
fis-1265	13	10	several	several	ADJ
fis-1265	13	11	sensors	sensor	NOUN
fis-1265	13	12	with	with	ADP
fis-1265	13	13	different	different	ADJ
fis-1265	13	14	proof	proof	NOUN
fis-1265	13	15	masses	masse	NOUN
fis-1265	13	16	,	,	PUNCT
fis-1265	13	17	a	a	DET
fis-1265	13	18	review	review	NOUN
fis-1265	13	19	of	of	ADP
fis-1265	13	20	multi	multi	ADJ
fis-1265	13	21	-	-	ADJ
fis-1265	13	22	dof	dof	ADJ
fis-1265	13	23	inertial	inertial	ADJ
fis-1265	13	24	mems	mem	NOUN
fis-1265	13	25	is	be	AUX
fis-1265	13	26	presented	present	VERB
fis-1265	13	27	in	in	ADP
fis-1265	13	28	[	[	X
fis-1265	13	29	3	3	NUM
fis-1265	13	30	]	]	PUNCT
fis-1265	13	31	.	.	PUNCT
fis-1265	14	1	some	some	DET
fis-1265	14	2	interesting	interesting	ADJ
fis-1265	14	3	proposals	proposal	NOUN
fis-1265	14	4	also	also	ADV
fis-1265	14	5	exist	exist	VERB
fis-1265	14	6	of	of	ADP
fis-1265	14	7	multi	multi	ADJ
fis-1265	14	8	-	-	ADJ
fis-1265	14	9	axial	axial	ADJ
fis-1265	14	10	inertial	inertial	ADJ
fis-1265	14	11	sensors	sensor	NOUN
fis-1265	14	12	with	with	ADP
fis-1265	14	13	a	a	DET
fis-1265	14	14	single	single	ADJ
fis-1265	14	15	proof	proof	NOUN
fis-1265	14	16	mass	mass	NOUN
fis-1265	14	17	:	:	PUNCT
fis-1265	14	18	in	in	ADP
fis-1265	14	19	[	[	X
fis-1265	14	20	4	4	X
fis-1265	14	21	]	]	PUNCT
fis-1265	14	22	a	a	DET
fis-1265	14	23	five	five	NUM
fis-1265	14	24	-	-	PUNCT
fis-1265	14	25	axis	axis	NOUN
fis-1265	14	26	sensor	sensor	NOUN
fis-1265	14	27	(	(	PUNCT
fis-1265	14	28	3	3	NUM
fis-1265	14	29	-	-	PUNCT
fis-1265	14	30	axis	axis	NOUN
fis-1265	14	31	accelerometer	accelerometer	NOUN
fis-1265	14	32	and	and	CCONJ
fis-1265	14	33	2	2	NUM
fis-1265	14	34	-	-	PUNCT
fis-1265	14	35	axis	axis	NOUN
fis-1265	14	36	gyroscope	gyroscope	NOUN
fis-1265	14	37	)	)	PUNCT
fis-1265	14	38	with	with	ADP
fis-1265	14	39	capacitive	capacitive	ADJ
fis-1265	14	40	detection	detection	NOUN
fis-1265	14	41	was	be	AUX
fis-1265	14	42	fabricated	fabricate	VERB
fis-1265	14	43	using	use	VERB
fis-1265	14	44	silicon	silicon	NOUN
fis-1265	14	45	bulk	bulk	ADJ
fis-1265	14	46	micromachining	micromachining	NOUN
fis-1265	14	47	;	;	PUNCT
fis-1265	14	48	in	in	ADP
fis-1265	14	49	[	[	X
fis-1265	14	50	5	5	NUM
fis-1265	14	51	]	]	PUNCT
fis-1265	14	52	a	a	DET
fis-1265	14	53	six	six	NUM
fis-1265	14	54	-	-	PUNCT
fis-1265	14	55	axis	axis	NOUN
fis-1265	14	56	vortex	vortex	NOUN
fis-1265	14	57	sensor	sensor	NOUN
fis-1265	14	58	(	(	PUNCT
fis-1265	14	59	3	3	NUM
fis-1265	14	60	-	-	PUNCT
fis-1265	14	61	axis	axis	NOUN
fis-1265	14	62	accelerometer	accelerometer	NOUN
fis-1265	14	63	and	and	CCONJ
fis-1265	14	64	3	3	NUM
fis-1265	14	65	-	-	PUNCT
fis-1265	14	66	axis	axis	NOUN
fis-1265	14	67	gyroscope	gyroscope	NOUN
fis-1265	14	68	)	)	PUNCT
fis-1265	14	69	with	with	ADP
fis-1265	14	70	piezo	piezo	ADJ
fis-1265	14	71	-	-	ADJ
fis-1265	14	72	resistive	resistive	ADJ
fis-1265	14	73	detection	detection	NOUN
fis-1265	14	74	was	be	AUX
fis-1265	14	75	proposed	propose	VERB
fis-1265	14	76	.	.	PUNCT
fis-1265	15	1	in	in	ADP
fis-1265	15	2	this	this	DET
fis-1265	15	3	line	line	NOUN
fis-1265	15	4	of	of	ADP
fis-1265	15	5	research	research	NOUN
fis-1265	15	6	,	,	PUNCT
fis-1265	15	7	in	in	ADP
fis-1265	15	8	the	the	DET
fis-1265	15	9	present	present	ADJ
fis-1265	15	10	work	work	NOUN
fis-1265	15	11	we	we	PRON
fis-1265	15	12	study	study	VERB
fis-1265	15	13	an	an	DET
fis-1265	15	14	integrated	integrate	VERB
fis-1265	15	15	structure	structure	NOUN
fis-1265	15	16	for	for	ADP
fis-1265	15	17	a	a	DET
fis-1265	15	18	micro	micro	NOUN
fis-1265	15	19	-	-	NOUN
fis-1265	15	20	gyroscope	gyroscope	NOUN
fis-1265	15	21	and	and	CCONJ
fis-1265	15	22	accelerometer	accelerometer	NOUN
fis-1265	15	23	.	.	PUNCT
fis-1265	16	1	the	the	DET
fis-1265	16	2	device	device	NOUN
fis-1265	16	3	is	be	AUX
fis-1265	16	4	fabricated	fabricate	VERB
fis-1265	16	5	by	by	ADP
fis-1265	16	6	the	the	DET
fis-1265	16	7	thelma	thelma	PROPN
fis-1265	16	8	©	©	PROPN
fis-1265	16	9	surface	surface	NOUN
fis-1265	16	10	-	-	PUNCT
fis-1265	16	11	micromachining	micromachine	VERB
fis-1265	16	12	technique	technique	NOUN
fis-1265	16	13	[	[	X
fis-1265	16	14	6	6	NUM
fis-1265	16	15	]	]	PUNCT
fis-1265	16	16	that	that	PRON
fis-1265	16	17	makes	make	VERB
fis-1265	16	18	it	it	PRON
fis-1265	16	19	possible	possible	ADJ
fis-1265	16	20	to	to	PART
fis-1265	16	21	obtain	obtain	VERB
fis-1265	16	22	planar	planar	ADJ
fis-1265	16	23	suspended	suspend	VERB
fis-1265	16	24	structures	structure	NOUN
fis-1265	16	25	with	with	ADP
fis-1265	16	26	relatively	relatively	ADV
fis-1265	16	27	small	small	ADJ
fis-1265	16	28	thickness	thickness	NOUN
fis-1265	16	29	,	,	PUNCT
fis-1265	16	30	anchored	anchor	VERB
fis-1265	16	31	to	to	ADP
fis-1265	16	32	the	the	DET
fis-1265	16	33	substrate	substrate	NOUN
fis-1265	16	34	through	through	ADP
fis-1265	16	35	flexible	flexible	ADJ
fis-1265	16	36	parts	part	NOUN
fis-1265	16	37	(	(	PUNCT
fis-1265	16	38	springs	spring	NOUN
fis-1265	16	39	)	)	PUNCT
fis-1265	16	40	and	and	CCONJ
fis-1265	16	41	m	m	PROPN
fis-1265	16	42	v.	v.	ADP
fis-1265	16	43	zega	zega	PROPN
fis-1265	16	44	et	et	PROPN
fis-1265	16	45	alii	alii	PROPN
fis-1265	16	46	,	,	PUNCT
fis-1265	16	47	frattura	frattura	PROPN
fis-1265	16	48	ed	ed	PROPN
fis-1265	16	49	integrità	integrità	PROPN
fis-1265	16	50	strutturale	strutturale	PROPN
fis-1265	16	51	,	,	PUNCT
fis-1265	16	52	29	29	NUM
fis-1265	16	53	(	(	PUNCT
fis-1265	16	54	2014	2014	NUM
fis-1265	16	55	)	)	PUNCT
fis-1265	16	56	334	334	NUM
fis-1265	16	57	-	-	SYM
fis-1265	16	58	342	342	NUM
fis-1265	16	59	;	;	PUNCT
fis-1265	16	60	doi	doi	NOUN
fis-1265	16	61	:	:	PUNCT
fis-1265	16	62	10.3221	10.3221	NUM
fis-1265	16	63	/	/	SYM
fis-1265	16	64	igf	igf	PROPN
fis-1265	16	65	-	-	PUNCT
fis-1265	16	66	esis.29.29	esis.29.29	PROPN
fis-1265	16	67	335	335	NUM
fis-1265	16	68	consequently	consequently	ADV
fis-1265	16	69	able	able	ADJ
fis-1265	16	70	to	to	PART
fis-1265	16	71	displace	displace	VERB
fis-1265	16	72	with	with	ADP
fis-1265	16	73	respect	respect	NOUN
fis-1265	16	74	to	to	ADP
fis-1265	16	75	the	the	DET
fis-1265	16	76	underlying	underlying	ADJ
fis-1265	16	77	silicon	silicon	NOUN
fis-1265	16	78	substrate	substrate	NOUN
fis-1265	16	79	.	.	PUNCT
fis-1265	17	1	the	the	DET
fis-1265	17	2	proposed	propose	VERB
fis-1265	17	3	four	four	NUM
fis-1265	17	4	-	-	PUNCT
fis-1265	17	5	axis	axis	NOUN
fis-1265	17	6	sensor	sensor	NOUN
fis-1265	17	7	makes	make	VERB
fis-1265	17	8	use	use	NOUN
fis-1265	17	9	of	of	ADP
fis-1265	17	10	differential	differential	ADJ
fis-1265	17	11	resonant	resonant	NOUN
fis-1265	17	12	detection	detection	NOUN
fis-1265	17	13	for	for	ADP
fis-1265	17	14	both	both	PRON
fis-1265	17	15	in	in	ADP
fis-1265	17	16	-	-	PUNCT
fis-1265	17	17	plane	plane	NOUN
fis-1265	17	18	and	and	CCONJ
fis-1265	17	19	out	out	ADP
fis-1265	17	20	-	-	PUNCT
fis-1265	17	21	of	of	ADP
fis-1265	17	22	plane	plane	NOUN
fis-1265	17	23	acceleration	acceleration	NOUN
fis-1265	17	24	components	component	NOUN
fis-1265	17	25	and	and	CCONJ
fis-1265	17	26	roll	roll	NOUN
fis-1265	17	27	and	and	CCONJ
fis-1265	17	28	yaw	yaw	NOUN
fis-1265	17	29	velocity	velocity	NOUN
fis-1265	17	30	components	component	NOUN
fis-1265	17	31	.	.	PUNCT
fis-1265	18	1	resonant	resonant	ADJ
fis-1265	18	2	detection	detection	NOUN
fis-1265	18	3	,	,	PUNCT
fis-1265	18	4	as	as	SCONJ
fis-1265	18	5	compared	compare	VERB
fis-1265	18	6	to	to	ADP
fis-1265	18	7	other	other	ADJ
fis-1265	18	8	measuring	measure	VERB
fis-1265	18	9	techniques	technique	NOUN
fis-1265	18	10	,	,	PUNCT
fis-1265	18	11	has	have	VERB
fis-1265	18	12	the	the	DET
fis-1265	18	13	advantage	advantage	NOUN
fis-1265	18	14	of	of	ADP
fis-1265	18	15	affording	afford	VERB
fis-1265	18	16	a	a	DET
fis-1265	18	17	direct	direct	ADJ
fis-1265	18	18	frequency	frequency	NOUN
fis-1265	18	19	output	output	NOUN
fis-1265	18	20	,	,	PUNCT
fis-1265	18	21	of	of	ADP
fis-1265	18	22	a	a	DET
fis-1265	18	23	quasi	quasi	ADJ
fis-1265	18	24	-	-	ADJ
fis-1265	18	25	digital	digital	ADJ
fis-1265	18	26	type	type	NOUN
fis-1265	18	27	,	,	PUNCT
fis-1265	18	28	a	a	DET
fis-1265	18	29	high	high	ADJ
fis-1265	18	30	sensitivity	sensitivity	NOUN
fis-1265	18	31	and	and	CCONJ
fis-1265	18	32	a	a	DET
fis-1265	18	33	wide	wide	ADJ
fis-1265	18	34	dynamic	dynamic	ADJ
fis-1265	18	35	range	range	NOUN
fis-1265	18	36	.	.	PUNCT
fis-1265	19	1	while	while	SCONJ
fis-1265	19	2	several	several	ADJ
fis-1265	19	3	resonant	resonant	ADJ
fis-1265	19	4	accelerometers	accelerometer	NOUN
fis-1265	19	5	have	have	AUX
fis-1265	19	6	been	be	AUX
fis-1265	19	7	proposed	propose	VERB
fis-1265	19	8	in	in	ADP
fis-1265	19	9	the	the	DET
fis-1265	19	10	literature	literature	NOUN
fis-1265	19	11	[	[	X
fis-1265	19	12	7	7	NUM
fis-1265	19	13	-	-	SYM
fis-1265	19	14	10	10	NUM
fis-1265	19	15	]	]	PUNCT
fis-1265	19	16	there	there	PRON
fis-1265	19	17	exist	exist	VERB
fis-1265	19	18	a	a	DET
fis-1265	19	19	few	few	ADJ
fis-1265	19	20	examples	example	NOUN
fis-1265	19	21	of	of	ADP
fis-1265	19	22	micro	micro	NOUN
fis-1265	19	23	-	-	NOUN
fis-1265	19	24	gyroscopes	gyroscope	NOUN
fis-1265	19	25	with	with	ADP
fis-1265	19	26	resonant	resonant	ADJ
fis-1265	19	27	detection	detection	NOUN
fis-1265	19	28	[	[	X
fis-1265	19	29	11	11	NUM
fis-1265	19	30	-	-	SYM
fis-1265	19	31	12	12	NUM
fis-1265	19	32	]	]	PUNCT
fis-1265	19	33	.	.	PUNCT
fis-1265	20	1	the	the	DET
fis-1265	20	2	proposed	propose	VERB
fis-1265	20	3	device	device	NOUN
fis-1265	20	4	makes	make	VERB
fis-1265	20	5	simultaneous	simultaneous	ADJ
fis-1265	20	6	use	use	NOUN
fis-1265	20	7	of	of	ADP
fis-1265	20	8	two	two	NUM
fis-1265	20	9	different	different	ADJ
fis-1265	20	10	operating	operating	NOUN
fis-1265	20	11	principles	principle	NOUN
fis-1265	20	12	typical	typical	ADJ
fis-1265	20	13	of	of	ADP
fis-1265	20	14	resonant	resonant	ADJ
fis-1265	20	15	mems	mem	NOUN
fis-1265	20	16	:	:	PUNCT
fis-1265	20	17	the	the	DET
fis-1265	20	18	frequency	frequency	NOUN
fis-1265	20	19	shift	shift	NOUN
fis-1265	20	20	due	due	ADP
fis-1265	20	21	to	to	ADP
fis-1265	20	22	the	the	DET
fis-1265	20	23	presence	presence	NOUN
fis-1265	20	24	of	of	ADP
fis-1265	20	25	axial	axial	ADJ
fis-1265	20	26	stresses	stress	NOUN
fis-1265	20	27	in	in	ADP
fis-1265	20	28	slender	slender	ADJ
fis-1265	20	29	resonating	resonate	VERB
fis-1265	20	30	beams	beam	NOUN
fis-1265	20	31	and	and	CCONJ
fis-1265	20	32	the	the	DET
fis-1265	20	33	frequency	frequency	NOUN
fis-1265	20	34	shift	shift	NOUN
fis-1265	20	35	due	due	ADP
fis-1265	20	36	to	to	ADP
fis-1265	20	37	variations	variation	NOUN
fis-1265	20	38	of	of	ADP
fis-1265	20	39	the	the	DET
fis-1265	20	40	so	so	ADV
fis-1265	20	41	-	-	PUNCT
fis-1265	20	42	called	call	VERB
fis-1265	20	43	electrical	electrical	ADJ
fis-1265	20	44	stiffness	stiffness	NOUN
fis-1265	20	45	in	in	ADP
fis-1265	20	46	torsional	torsional	ADJ
fis-1265	20	47	resonators	resonator	NOUN
fis-1265	20	48	.	.	PUNCT
fis-1265	21	1	in	in	ADP
fis-1265	21	2	particular	particular	ADJ
fis-1265	21	3	,	,	PUNCT
fis-1265	21	4	external	external	ADJ
fis-1265	21	5	in	in	ADP
fis-1265	21	6	-	-	PUNCT
fis-1265	21	7	plane	plane	NOUN
fis-1265	21	8	acceleration	acceleration	NOUN
fis-1265	21	9	or	or	CCONJ
fis-1265	21	10	yaw	yaw	NOUN
fis-1265	21	11	velocity	velocity	NOUN
fis-1265	21	12	make	make	VERB
fis-1265	21	13	the	the	DET
fis-1265	21	14	proof	proof	NOUN
fis-1265	21	15	masses	masse	NOUN
fis-1265	21	16	translate	translate	VERB
fis-1265	21	17	and	and	CCONJ
fis-1265	21	18	induce	induce	VERB
fis-1265	21	19	axial	axial	ADJ
fis-1265	21	20	forces	force	NOUN
fis-1265	21	21	in	in	ADP
fis-1265	21	22	bending	bend	VERB
fis-1265	21	23	resonators	resonator	NOUN
fis-1265	21	24	,	,	PUNCT
fis-1265	21	25	while	while	SCONJ
fis-1265	21	26	external	external	ADJ
fis-1265	21	27	out	out	ADV
fis-1265	21	28	-	-	PUNCT
fis-1265	21	29	of	of	ADP
fis-1265	21	30	-	-	PUNCT
fis-1265	21	31	plane	plane	NOUN
fis-1265	21	32	acceleration	acceleration	NOUN
fis-1265	21	33	or	or	CCONJ
fis-1265	21	34	roll	roll	NOUN
fis-1265	21	35	velocity	velocity	NOUN
fis-1265	21	36	make	make	VERB
fis-1265	21	37	the	the	DET
fis-1265	21	38	proof	proof	NOUN
fis-1265	21	39	masses	mass	VERB
fis-1265	21	40	tilt	tilt	VERB
fis-1265	21	41	and	and	CCONJ
fis-1265	21	42	change	change	VERB
fis-1265	21	43	the	the	DET
fis-1265	21	44	electrical	electrical	ADJ
fis-1265	21	45	stiffness	stiffness	NOUN
fis-1265	21	46	of	of	ADP
fis-1265	21	47	torsional	torsional	ADJ
fis-1265	21	48	resonators	resonator	NOUN
fis-1265	21	49	.	.	PUNCT
fis-1265	22	1	the	the	DET
fis-1265	22	2	paper	paper	NOUN
fis-1265	22	3	is	be	AUX
fis-1265	22	4	organized	organize	VERB
fis-1265	22	5	as	as	SCONJ
fis-1265	22	6	follows	follow	VERB
fis-1265	22	7	.	.	PUNCT
fis-1265	23	1	the	the	DET
fis-1265	23	2	first	first	ADJ
fis-1265	23	3	section	section	NOUN
fis-1265	23	4	presents	present	VERB
fis-1265	23	5	the	the	DET
fis-1265	23	6	device	device	NOUN
fis-1265	23	7	design	design	NOUN
fis-1265	23	8	,	,	PUNCT
fis-1265	23	9	discusses	discuss	VERB
fis-1265	23	10	the	the	DET
fis-1265	23	11	mechanical	mechanical	ADJ
fis-1265	23	12	behavior	behavior	NOUN
fis-1265	23	13	of	of	ADP
fis-1265	23	14	the	the	DET
fis-1265	23	15	resonating	resonate	VERB
fis-1265	23	16	parts	part	NOUN
fis-1265	23	17	and	and	CCONJ
fis-1265	23	18	provides	provide	VERB
fis-1265	23	19	an	an	DET
fis-1265	23	20	analytical	analytical	ADJ
fis-1265	23	21	estimate	estimate	NOUN
fis-1265	23	22	of	of	ADP
fis-1265	23	23	the	the	DET
fis-1265	23	24	sensitivity	sensitivity	NOUN
fis-1265	23	25	.	.	PUNCT
fis-1265	24	1	the	the	DET
fis-1265	24	2	second	second	ADJ
fis-1265	24	3	section	section	NOUN
fis-1265	24	4	focuses	focus	VERB
fis-1265	24	5	on	on	ADP
fis-1265	24	6	the	the	DET
fis-1265	24	7	fabricated	fabricate	VERB
fis-1265	24	8	device	device	NOUN
fis-1265	24	9	and	and	CCONJ
fis-1265	24	10	presents	present	VERB
fis-1265	24	11	the	the	DET
fis-1265	24	12	results	result	NOUN
fis-1265	24	13	of	of	ADP
fis-1265	24	14	numerical	numerical	ADJ
fis-1265	24	15	modal	modal	ADJ
fis-1265	24	16	simulations	simulation	NOUN
fis-1265	24	17	.	.	PUNCT
fis-1265	25	1	experimental	experimental	ADJ
fis-1265	25	2	characterization	characterization	NOUN
fis-1265	25	3	of	of	ADP
fis-1265	25	4	the	the	DET
fis-1265	25	5	integrated	integrate	VERB
fis-1265	25	6	sensor	sensor	NOUN
fis-1265	25	7	is	be	AUX
fis-1265	25	8	currently	currently	ADV
fis-1265	25	9	under	under	ADP
fis-1265	25	10	development	development	NOUN
fis-1265	25	11	.	.	PUNCT
fis-1265	26	1	device	device	NOUN
fis-1265	26	2	design	design	NOUN
fis-1265	26	3	device	device	NOUN
fis-1265	26	4	structure	structure	NOUN
fis-1265	26	5	he	he	PRON
fis-1265	26	6	proposed	propose	VERB
fis-1265	26	7	structure	structure	NOUN
fis-1265	26	8	is	be	AUX
fis-1265	26	9	schematically	schematically	NOUN
fis-1265	26	10	shown	show	VERB
fis-1265	26	11	in	in	ADP
fis-1265	26	12	fig	fig	NOUN
fis-1265	26	13	.	.	PUNCT
fis-1265	27	1	1	1	X
fis-1265	27	2	.	.	X
fis-1265	27	3	the	the	DET
fis-1265	27	4	device	device	NOUN
fis-1265	27	5	is	be	AUX
fis-1265	27	6	constituted	constitute	VERB
fis-1265	27	7	by	by	ADP
fis-1265	27	8	two	two	NUM
fis-1265	27	9	moving	move	VERB
fis-1265	27	10	proof	proof	ADJ
fis-1265	27	11	masses	masse	NOUN
fis-1265	27	12	attached	attach	VERB
fis-1265	27	13	to	to	ADP
fis-1265	27	14	the	the	DET
fis-1265	27	15	substrate	substrate	NOUN
fis-1265	27	16	by	by	ADP
fis-1265	27	17	means	mean	NOUN
fis-1265	27	18	of	of	ADP
fis-1265	27	19	folded	fold	VERB
fis-1265	27	20	springs	spring	NOUN
fis-1265	27	21	which	which	PRON
fis-1265	27	22	allow	allow	VERB
fis-1265	27	23	their	their	PRON
fis-1265	27	24	translation	translation	NOUN
fis-1265	27	25	in	in	ADP
fis-1265	27	26	the	the	DET
fis-1265	27	27	plane	plane	NOUN
fis-1265	27	28	and	and	CCONJ
fis-1265	27	29	their	their	PRON
fis-1265	27	30	tilting	tilting	NOUN
fis-1265	27	31	around	around	ADP
fis-1265	27	32	the	the	DET
fis-1265	27	33	axes	axis	NOUN
fis-1265	27	34	a	a	DET
fis-1265	27	35	-	-	PUNCT
fis-1265	27	36	a.	a.	NOUN
fis-1265	27	37	four	four	NUM
fis-1265	27	38	bending	bend	VERB
fis-1265	27	39	resonators	resonator	NOUN
fis-1265	27	40	(	(	PUNCT
fis-1265	27	41	labelled	label	VERB
fis-1265	27	42	i	i	PROPN
fis-1265	27	43	,	,	PUNCT
fis-1265	27	44	ii	ii	PROPN
fis-1265	27	45	,	,	PUNCT
fis-1265	27	46	iii	iii	PROPN
fis-1265	27	47	and	and	CCONJ
fis-1265	27	48	iv	iv	NUM
fis-1265	27	49	in	in	ADP
fis-1265	27	50	fig	fig	NOUN
fis-1265	27	51	.	.	PUNCT
fis-1265	28	1	1	1	NUM
fis-1265	28	2	)	)	PUNCT
fis-1265	28	3	are	be	AUX
fis-1265	28	4	located	locate	VERB
fis-1265	28	5	beside	beside	ADP
fis-1265	28	6	the	the	DET
fis-1265	28	7	masses	masse	NOUN
fis-1265	28	8	and	and	CCONJ
fis-1265	28	9	attached	attach	VERB
fis-1265	28	10	to	to	ADP
fis-1265	28	11	them	they	PRON
fis-1265	28	12	through	through	ADP
fis-1265	28	13	the	the	DET
fis-1265	28	14	external	external	ADJ
fis-1265	28	15	springs	spring	NOUN
fis-1265	28	16	and	and	CCONJ
fis-1265	28	17	four	four	NUM
fis-1265	28	18	torsional	torsional	ADJ
fis-1265	28	19	resonators	resonator	NOUN
fis-1265	28	20	(	(	PUNCT
fis-1265	28	21	labelled	label	VERB
fis-1265	28	22	1	1	NUM
fis-1265	28	23	,	,	PUNCT
fis-1265	28	24	2	2	NUM
fis-1265	28	25	,	,	PUNCT
fis-1265	28	26	3	3	NUM
fis-1265	28	27	and	and	CCONJ
fis-1265	28	28	4	4	NUM
fis-1265	28	29	in	in	ADP
fis-1265	28	30	fig	fig	NOUN
fis-1265	28	31	.	.	PUNCT
fis-1265	29	1	1	1	NUM
fis-1265	29	2	)	)	PUNCT
fis-1265	29	3	are	be	AUX
fis-1265	29	4	directly	directly	ADV
fis-1265	29	5	attached	attach	VERB
fis-1265	29	6	to	to	ADP
fis-1265	29	7	the	the	DET
fis-1265	29	8	masses	masse	NOUN
fis-1265	29	9	.	.	PUNCT
fis-1265	30	1	the	the	DET
fis-1265	30	2	variation	variation	NOUN
fis-1265	30	3	of	of	ADP
fis-1265	30	4	the	the	DET
fis-1265	30	5	resonance	resonance	NOUN
fis-1265	30	6	frequency	frequency	NOUN
fis-1265	30	7	in	in	ADP
fis-1265	30	8	the	the	DET
fis-1265	30	9	flexural	flexural	ADJ
fis-1265	30	10	resonators	resonator	NOUN
fis-1265	30	11	is	be	AUX
fis-1265	30	12	induced	induce	VERB
fis-1265	30	13	by	by	ADP
fis-1265	30	14	the	the	DET
fis-1265	30	15	presence	presence	NOUN
fis-1265	30	16	,	,	PUNCT
fis-1265	30	17	upon	upon	SCONJ
fis-1265	30	18	translation	translation	NOUN
fis-1265	30	19	of	of	ADP
fis-1265	30	20	the	the	DET
fis-1265	30	21	inertial	inertial	ADJ
fis-1265	30	22	mass	mass	NOUN
fis-1265	30	23	,	,	PUNCT
fis-1265	30	24	of	of	ADP
fis-1265	30	25	axial	axial	ADJ
fis-1265	30	26	stresses	stress	NOUN
fis-1265	30	27	while	while	SCONJ
fis-1265	30	28	in	in	ADP
fis-1265	30	29	the	the	DET
fis-1265	30	30	torsional	torsional	ADJ
fis-1265	30	31	resonators	resonator	NOUN
fis-1265	30	32	it	it	PRON
fis-1265	30	33	is	be	AUX
fis-1265	30	34	induced	induce	VERB
fis-1265	30	35	by	by	ADP
fis-1265	30	36	variations	variation	NOUN
fis-1265	30	37	of	of	ADP
fis-1265	30	38	the	the	DET
fis-1265	30	39	so	so	ADV
fis-1265	30	40	-	-	PUNCT
fis-1265	30	41	called	call	VERB
fis-1265	30	42	“	"	PUNCT
fis-1265	30	43	electrical	electrical	ADJ
fis-1265	30	44	stiffness	stiffness	NOUN
fis-1265	30	45	”	"	PUNCT
fis-1265	30	46	to	to	PART
fis-1265	30	47	which	which	PRON
fis-1265	30	48	the	the	DET
fis-1265	30	49	resonator	resonator	NOUN
fis-1265	30	50	mass	mass	NOUN
fis-1265	30	51	is	be	AUX
fis-1265	30	52	subjected	subject	VERB
fis-1265	30	53	.	.	PUNCT
fis-1265	31	1	the	the	DET
fis-1265	31	2	simultaneous	simultaneous	ADJ
fis-1265	31	3	use	use	NOUN
fis-1265	31	4	of	of	ADP
fis-1265	31	5	these	these	DET
fis-1265	31	6	two	two	NUM
fis-1265	31	7	different	different	ADJ
fis-1265	31	8	type	type	NOUN
fis-1265	31	9	of	of	ADP
fis-1265	31	10	resonators	resonator	NOUN
fis-1265	31	11	allows	allow	VERB
fis-1265	31	12	realizing	realize	VERB
fis-1265	31	13	of	of	ADP
fis-1265	31	14	a	a	DET
fis-1265	31	15	four	four	NUM
fis-1265	31	16	-	-	PUNCT
fis-1265	31	17	axis	axis	NOUN
fis-1265	31	18	sensor	sensor	NOUN
fis-1265	31	19	with	with	ADP
fis-1265	31	20	reduced	reduce	VERB
fis-1265	31	21	dimensions	dimension	NOUN
fis-1265	31	22	.	.	PUNCT
fis-1265	32	1	by	by	ADP
fis-1265	32	2	means	mean	NOUN
fis-1265	32	3	of	of	ADP
fis-1265	32	4	the	the	DET
fis-1265	32	5	flexural	flexural	ADJ
fis-1265	32	6	resonator	resonator	NOUN
fis-1265	32	7	elements	element	NOUN
fis-1265	32	8	,	,	PUNCT
fis-1265	32	9	the	the	DET
fis-1265	32	10	integrated	integrated	ADJ
fis-1265	32	11	detection	detection	NOUN
fis-1265	32	12	structure	structure	NOUN
fis-1265	32	13	enables	enable	VERB
fis-1265	32	14	differential	differential	ADJ
fis-1265	32	15	detection	detection	NOUN
fis-1265	32	16	of	of	ADP
fis-1265	32	17	an	an	DET
fis-1265	32	18	angular	angular	ADJ
fis-1265	32	19	velocity	velocity	NOUN
fis-1265	32	20	acting	act	VERB
fis-1265	32	21	about	about	ADP
fis-1265	32	22	an	an	DET
fis-1265	32	23	out	out	ADV
fis-1265	32	24	-	-	PUNCT
fis-1265	32	25	of	of	ADP
fis-1265	32	26	-	-	PUNCT
fis-1265	32	27	plane	plane	NOUN
fis-1265	32	28	direction	direction	NOUN
fis-1265	32	29	,	,	PUNCT
fis-1265	32	30	the	the	DET
fis-1265	32	31	yaw	yaw	NOUN
fis-1265	32	32	angular	angular	ADJ
fis-1265	32	33	velocity	velocity	NOUN
fis-1265	32	34	ωz	ωz	ADP
fis-1265	32	35	,	,	PUNCT
fis-1265	32	36	and	and	CCONJ
fis-1265	32	37	of	of	ADP
fis-1265	32	38	a	a	DET
fis-1265	32	39	linear	linear	ADJ
fis-1265	32	40	acceleration	acceleration	NOUN
fis-1265	32	41	ay	ay	NOUN
fis-1265	32	42	along	along	ADP
fis-1265	32	43	the	the	DET
fis-1265	32	44	y	y	NOUN
fis-1265	32	45	-	-	PUNCT
fis-1265	32	46	axis	axis	NOUN
fis-1265	32	47	.	.	PUNCT
fis-1265	33	1	in	in	ADP
fis-1265	33	2	addition	addition	NOUN
fis-1265	33	3	,	,	PUNCT
fis-1265	33	4	by	by	ADP
fis-1265	33	5	means	mean	NOUN
fis-1265	33	6	of	of	ADP
fis-1265	33	7	the	the	DET
fis-1265	33	8	torsional	torsional	ADJ
fis-1265	33	9	resonator	resonator	NOUN
fis-1265	33	10	elements	element	NOUN
fis-1265	33	11	,	,	PUNCT
fis-1265	33	12	the	the	DET
fis-1265	33	13	integrated	integrated	ADJ
fis-1265	33	14	detection	detection	NOUN
fis-1265	33	15	structure	structure	NOUN
fis-1265	33	16	enables	enable	VERB
fis-1265	33	17	differential	differential	ADJ
fis-1265	33	18	detection	detection	NOUN
fis-1265	33	19	of	of	ADP
fis-1265	33	20	an	an	DET
fis-1265	33	21	angular	angular	ADJ
fis-1265	33	22	velocity	velocity	NOUN
fis-1265	33	23	acting	act	VERB
fis-1265	33	24	about	about	ADP
fis-1265	33	25	the	the	DET
fis-1265	33	26	y	y	NOUN
fis-1265	33	27	-	-	PUNCT
fis-1265	33	28	axis	axis	NOUN
fis-1265	33	29	,	,	PUNCT
fis-1265	33	30	the	the	DET
fis-1265	33	31	roll	roll	NOUN
fis-1265	33	32	angular	angular	ADJ
fis-1265	33	33	velocity	velocity	NOUN
fis-1265	33	34	ωy	ωy	PROPN
fis-1265	33	35	,	,	PUNCT
fis-1265	33	36	and	and	CCONJ
fis-1265	33	37	of	of	ADP
fis-1265	33	38	a	a	DET
fis-1265	33	39	linear	linear	ADJ
fis-1265	33	40	out	out	ADP
fis-1265	33	41	-	-	PUNCT
fis-1265	33	42	of	of	ADP
fis-1265	33	43	-	-	PUNCT
fis-1265	33	44	plane	plane	NOUN
fis-1265	33	45	acceleration	acceleration	NOUN
fis-1265	33	46	az	az	PROPN
fis-1265	33	47	.	.	PUNCT
fis-1265	34	1	figure	figure	VERB
fis-1265	34	2	1	1	NUM
fis-1265	34	3	:	:	PUNCT
fis-1265	34	4	schematic	schematic	ADJ
fis-1265	34	5	plan	plan	NOUN
fis-1265	34	6	view	view	NOUN
fis-1265	34	7	of	of	ADP
fis-1265	34	8	the	the	DET
fis-1265	34	9	structure	structure	NOUN
fis-1265	34	10	,	,	PUNCT
fis-1265	34	11	for	for	ADP
fis-1265	34	12	detection	detection	NOUN
fis-1265	34	13	of	of	ADP
fis-1265	34	14	acceleration	acceleration	NOUN
fis-1265	34	15	and	and	CCONJ
fis-1265	34	16	angular	angular	ADJ
fis-1265	34	17	velocity	velocity	NOUN
fis-1265	34	18	.	.	PUNCT
fis-1265	35	1	t	t	PROPN
fis-1265	35	2	v.	v.	CCONJ
fis-1265	35	3	zega	zega	PROPN
fis-1265	35	4	et	et	PROPN
fis-1265	35	5	alii	alii	PROPN
fis-1265	35	6	,	,	PUNCT
fis-1265	35	7	frattura	frattura	PROPN
fis-1265	35	8	ed	ed	PROPN
fis-1265	35	9	integrità	integrità	PROPN
fis-1265	35	10	strutturale	strutturale	PROPN
fis-1265	35	11	,	,	PUNCT
fis-1265	35	12	29	29	NUM
fis-1265	35	13	(	(	PUNCT
fis-1265	35	14	2014	2014	NUM
fis-1265	35	15	)	)	PUNCT
fis-1265	35	16	334	334	NUM
fis-1265	35	17	-	-	SYM
fis-1265	35	18	342	342	NUM
fis-1265	35	19	;	;	PUNCT
fis-1265	35	20	doi	doi	NOUN
fis-1265	35	21	:	:	PUNCT
fis-1265	35	22	10.3221	10.3221	NUM
fis-1265	35	23	/	/	SYM
fis-1265	35	24	igf	igf	PROPN
fis-1265	35	25	-	-	PUNCT
fis-1265	35	26	esis.29.29	esis.29.29	PROPN
fis-1265	35	27	336	336	NUM
fis-1265	35	28	bending	bending	NOUN
fis-1265	35	29	and	and	CCONJ
fis-1265	35	30	torsional	torsional	ADJ
fis-1265	35	31	resonators	resonator	NOUN
fis-1265	35	32	we	we	PRON
fis-1265	35	33	first	first	ADV
fis-1265	35	34	focus	focus	VERB
fis-1265	35	35	on	on	ADP
fis-1265	35	36	the	the	DET
fis-1265	35	37	modelling	modelling	NOUN
fis-1265	35	38	of	of	ADP
fis-1265	35	39	the	the	DET
fis-1265	35	40	two	two	NUM
fis-1265	35	41	types	type	NOUN
fis-1265	35	42	of	of	ADP
fis-1265	35	43	resonator	resonator	NOUN
fis-1265	35	44	which	which	PRON
fis-1265	35	45	constitute	constitute	VERB
fis-1265	35	46	the	the	DET
fis-1265	35	47	sensing	sense	VERB
fis-1265	35	48	elements	element	NOUN
fis-1265	35	49	of	of	ADP
fis-1265	35	50	the	the	DET
fis-1265	35	51	integrated	integrate	VERB
fis-1265	35	52	structure	structure	NOUN
fis-1265	35	53	.	.	PUNCT
fis-1265	36	1	the	the	DET
fis-1265	36	2	flexural	flexural	ADJ
fis-1265	36	3	resonators	resonator	NOUN
fis-1265	36	4	are	be	AUX
fis-1265	36	5	very	very	ADV
fis-1265	36	6	thin	thin	ADJ
fis-1265	36	7	beams	beam	NOUN
fis-1265	36	8	attached	attach	VERB
fis-1265	36	9	to	to	ADP
fis-1265	36	10	the	the	DET
fis-1265	36	11	substrate	substrate	NOUN
fis-1265	36	12	at	at	ADP
fis-1265	36	13	one	one	NUM
fis-1265	36	14	end	end	NOUN
fis-1265	36	15	and	and	CCONJ
fis-1265	36	16	to	to	ADP
fis-1265	36	17	the	the	DET
fis-1265	36	18	springs	spring	NOUN
fis-1265	36	19	at	at	ADP
fis-1265	36	20	the	the	DET
fis-1265	36	21	other	other	ADJ
fis-1265	36	22	end	end	NOUN
fis-1265	36	23	,	,	PUNCT
fis-1265	36	24	at	at	ADP
fis-1265	36	25	a	a	DET
fis-1265	36	26	certain	certain	ADJ
fis-1265	36	27	distance	distance	NOUN
fis-1265	36	28	h	h	NOUN
fis-1265	36	29	from	from	ADP
fis-1265	36	30	the	the	DET
fis-1265	36	31	anchor	anchor	NOUN
fis-1265	36	32	point	point	NOUN
fis-1265	36	33	(	(	PUNCT
fis-1265	36	34	see	see	VERB
fis-1265	36	35	fig	fig	NOUN
fis-1265	36	36	.	.	PUNCT
fis-1265	37	1	2(a	2(a	NUM
fis-1265	37	2	)	)	PUNCT
fis-1265	37	3	)	)	PUNCT
fis-1265	37	4	.	.	PUNCT
fis-1265	38	1	the	the	DET
fis-1265	38	2	optimal	optimal	ADJ
fis-1265	38	3	length	length	NOUN
fis-1265	38	4	of	of	ADP
fis-1265	38	5	h	h	NOUN
fis-1265	38	6	is	be	AUX
fis-1265	38	7	selected	select	VERB
fis-1265	38	8	to	to	PART
fis-1265	38	9	maximize	maximize	VERB
fis-1265	38	10	the	the	DET
fis-1265	38	11	sensitivity	sensitivity	NOUN
fis-1265	38	12	of	of	ADP
fis-1265	38	13	the	the	DET
fis-1265	38	14	device	device	NOUN
fis-1265	38	15	.	.	PUNCT
fis-1265	39	1	the	the	DET
fis-1265	39	2	electrostatic	electrostatic	ADJ
fis-1265	39	3	driving	driving	NOUN
fis-1265	39	4	of	of	ADP
fis-1265	39	5	the	the	DET
fis-1265	39	6	resonator	resonator	NOUN
fis-1265	39	7	is	be	AUX
fis-1265	39	8	done	do	VERB
fis-1265	39	9	by	by	ADP
fis-1265	39	10	means	mean	NOUN
fis-1265	39	11	of	of	ADP
fis-1265	39	12	an	an	DET
fis-1265	39	13	electrode	electrode	NOUN
fis-1265	39	14	attached	attach	VERB
fis-1265	39	15	to	to	ADP
fis-1265	39	16	the	the	DET
fis-1265	39	17	substrate	substrate	NOUN
fis-1265	39	18	with	with	ADP
fis-1265	39	19	initial	initial	ADJ
fis-1265	39	20	gap	gap	NOUN
fis-1265	39	21	d0	d0	NOUN
fis-1265	39	22	;	;	PUNCT
fis-1265	39	23	another	another	DET
fis-1265	39	24	parallel	parallel	ADJ
fis-1265	39	25	electrode	electrode	NOUN
fis-1265	39	26	allows	allow	VERB
fis-1265	39	27	for	for	ADP
fis-1265	39	28	the	the	DET
fis-1265	39	29	sensing	sensing	NOUN
fis-1265	39	30	.	.	PUNCT
fis-1265	40	1	during	during	ADP
fis-1265	40	2	functioning	function	VERB
fis-1265	40	3	a	a	DET
fis-1265	40	4	polarization	polarization	NOUN
fis-1265	40	5	voltage	voltage	NOUN
fis-1265	40	6	vp	vp	PROPN
fis-1265	40	7	is	be	AUX
fis-1265	40	8	applied	apply	VERB
fis-1265	40	9	to	to	ADP
fis-1265	40	10	the	the	DET
fis-1265	40	11	resonator	resonator	NOUN
fis-1265	40	12	while	while	SCONJ
fis-1265	40	13	a	a	DET
fis-1265	40	14	small	small	ADJ
fis-1265	40	15	oscillating	oscillating	NOUN
fis-1265	40	16	signal	signal	NOUN
fis-1265	40	17	va(t	va(t	NOUN
fis-1265	40	18	)	)	PUNCT
fis-1265	40	19	applied	apply	VERB
fis-1265	40	20	to	to	ADP
fis-1265	40	21	the	the	DET
fis-1265	40	22	driving	drive	VERB
fis-1265	40	23	plate	plate	NOUN
fis-1265	40	24	drives	drive	VERB
fis-1265	40	25	the	the	DET
fis-1265	40	26	beam	beam	NOUN
fis-1265	40	27	to	to	ADP
fis-1265	40	28	resonance	resonance	NOUN
fis-1265	40	29	.	.	PUNCT
fis-1265	41	1	in	in	ADP
fis-1265	41	2	the	the	DET
fis-1265	41	3	absence	absence	NOUN
fis-1265	41	4	of	of	ADP
fis-1265	41	5	external	external	ADJ
fis-1265	41	6	input	input	NOUN
fis-1265	41	7	,	,	PUNCT
fis-1265	41	8	the	the	DET
fis-1265	41	9	resonator	resonator	NOUN
fis-1265	41	10	has	have	VERB
fis-1265	41	11	the	the	DET
fis-1265	41	12	nominal	nominal	ADJ
fis-1265	41	13	frequency	frequency	NOUN
fis-1265	41	14	0f	0f	NOUN
fis-1265	41	15	0	0	NUM
fis-1265	41	16	1	1	NUM
fis-1265	41	17	2	2	NUM
fis-1265	41	18	m	m	NOUN
fis-1265	41	19	ek	ek	NOUN
fis-1265	41	20	k	k	PROPN
fis-1265	41	21	f	f	PROPN
fis-1265	41	22	m	m	PROPN
fis-1265	41	23			PROPN
fis-1265	41	24			PRON
fis-1265	41	25	(	(	PUNCT
fis-1265	41	26	1	1	NUM
fis-1265	41	27	)	)	PUNCT
fis-1265	41	28	where	where	SCONJ
fis-1265	41	29	mk	mk	PROPN
fis-1265	41	30	,	,	PUNCT
fis-1265	41	31	ek	ek	PROPN
fis-1265	41	32	and	and	CCONJ
fis-1265	41	33	m	m	PROPN
fis-1265	41	34	are	be	AUX
fis-1265	41	35	the	the	DET
fis-1265	41	36	equivalent	equivalent	ADJ
fis-1265	41	37	mechanical	mechanical	ADJ
fis-1265	41	38	and	and	CCONJ
fis-1265	41	39	electrostatic	electrostatic	ADJ
fis-1265	41	40	stiffness	stiffness	NOUN
fis-1265	41	41	and	and	CCONJ
fis-1265	41	42	the	the	DET
fis-1265	41	43	equivalent	equivalent	ADJ
fis-1265	41	44	mass	mass	NOUN
fis-1265	41	45	,	,	PUNCT
fis-1265	41	46	respectively	respectively	ADV
fis-1265	41	47	.	.	PUNCT
fis-1265	42	1	figure	figure	NOUN
fis-1265	42	2	2	2	NUM
fis-1265	42	3	:	:	PUNCT
fis-1265	42	4	schematic	schematic	ADJ
fis-1265	42	5	views	view	NOUN
fis-1265	42	6	of	of	ADP
fis-1265	42	7	the	the	DET
fis-1265	42	8	resonators	resonator	NOUN
fis-1265	42	9	:	:	PUNCT
fis-1265	42	10	(	(	PUNCT
fis-1265	42	11	a	a	X
fis-1265	42	12	)	)	PUNCT
fis-1265	42	13	in	in	ADP
fis-1265	42	14	-	-	PUNCT
fis-1265	42	15	plane	plane	NOUN
fis-1265	42	16	view	view	NOUN
fis-1265	42	17	of	of	ADP
fis-1265	42	18	bending	bend	VERB
fis-1265	42	19	resonator	resonator	NOUN
fis-1265	42	20	,	,	PUNCT
fis-1265	42	21	(	(	PUNCT
fis-1265	42	22	b	b	NOUN
fis-1265	42	23	)	)	PUNCT
fis-1265	42	24	in	in	ADP
fis-1265	42	25	-	-	PUNCT
fis-1265	42	26	plane	plane	NOUN
fis-1265	42	27	and	and	CCONJ
fis-1265	42	28	side	side	NOUN
fis-1265	42	29	view	view	NOUN
fis-1265	42	30	of	of	ADP
fis-1265	42	31	torsional	torsional	ADJ
fis-1265	42	32	resonator	resonator	NOUN
fis-1265	42	33	their	their	PRON
fis-1265	42	34	expressions	expression	NOUN
fis-1265	42	35	can	can	AUX
fis-1265	42	36	be	be	AUX
fis-1265	42	37	obtained	obtain	VERB
fis-1265	42	38	as	as	ADP
fis-1265	42	39	in	in	ADP
fis-1265	42	40	[	[	PUNCT
fis-1265	42	41	13	13	NUM
fis-1265	42	42	]	]	PUNCT
fis-1265	42	43	making	make	VERB
fis-1265	42	44	use	use	NOUN
fis-1265	42	45	of	of	ADP
fis-1265	42	46	the	the	DET
fis-1265	42	47	hamiltonian	hamiltonian	NOUN
fis-1265	42	48	’s	’s	PART
fis-1265	42	49	principle	principle	NOUN
fis-1265	42	50	and	and	CCONJ
fis-1265	42	51	searching	search	VERB
fis-1265	42	52	for	for	ADP
fis-1265	42	53	the	the	DET
fis-1265	42	54	solution	solution	NOUN
fis-1265	42	55	,	,	PUNCT
fis-1265	42	56	in	in	ADP
fis-1265	42	57	terms	term	NOUN
fis-1265	42	58	of	of	ADP
fis-1265	42	59	transverse	transverse	NOUN
fis-1265	42	60	displacement	displacement	NOUN
fis-1265	42	61	of	of	ADP
fis-1265	42	62	the	the	DET
fis-1265	42	63	beam	beam	NOUN
fis-1265	42	64	,	,	PUNCT
fis-1265	42	65	in	in	ADP
fis-1265	42	66	the	the	DET
fis-1265	42	67	form	form	NOUN
fis-1265	42	68	(	(	PUNCT
fis-1265	42	69	,	,	PUNCT
fis-1265	42	70	)	)	PUNCT
fis-1265	42	71	(	(	PUNCT
fis-1265	42	72	)	)	PUNCT
fis-1265	42	73	(	(	PUNCT
fis-1265	42	74	)	)	PUNCT
fis-1265	43	1	w	w	PROPN
fis-1265	43	2	y	y	PROPN
fis-1265	43	3	t	t	PROPN
fis-1265	43	4	y	y	PROPN
fis-1265	43	5	w	w	PROPN
fis-1265	43	6	t	t	NOUN
fis-1265	43	7	.	.	PUNCT
fis-1265	44	1	using	use	VERB
fis-1265	44	2	as	as	ADP
fis-1265	44	3	(	(	PUNCT
fis-1265	44	4	)	)	PUNCT
fis-1265	44	5	y	y	NOUN
fis-1265	44	6	the	the	DET
fis-1265	44	7	eigenfunction	eigenfunction	NOUN
fis-1265	44	8	of	of	ADP
fis-1265	44	9	a	a	DET
fis-1265	44	10	doubly	doubly	ADV
fis-1265	44	11	clamped	clamp	VERB
fis-1265	44	12	beam	beam	NOUN
fis-1265	44	13	these	these	DET
fis-1265	44	14	equivalent	equivalent	ADJ
fis-1265	44	15	properties	property	NOUN
fis-1265	44	16	read	read	VERB
fis-1265	44	17	:	:	PUNCT
fis-1265	44	18			NOUN
fis-1265	44	19	2	2	ADJ
fis-1265	44	20	30	30	NUM
fis-1265	44	21	2	2	NUM
fis-1265	44	22	2	2	NUM
fis-1265	44	23	0	0	NUM
fis-1265	44	24	02	02	NUM
fis-1265	44	25	3	3	NUM
fis-1265	44	26	30	30	NUM
fis-1265	44	27	0	0	NUM
fis-1265	44	28	0	0	NUM
fis-1265	44	29	2	2	NUM
fis-1265	44	30	0	0	NUM
fis-1265	44	31	198.492	198.492	NUM
fis-1265	44	32	2	2	NUM
fis-1265	44	33	2	2	NUM
fis-1265	44	34	0.397	0.397	NUM
fis-1265	44	35	0.397	0.397	NUM
fis-1265	44	36	h	h	NOUN
fis-1265	45	1	m	m	NOUN
fis-1265	45	2	h	h	NOUN
fis-1265	46	1	p	p	NOUN
fis-1265	46	2	p	p	X
fis-1265	46	3	e	e	X
fis-1265	46	4	h	h	NOUN
fis-1265	46	5	ei	ei	X
fis-1265	46	6	k	k	X
fis-1265	46	7	ei	ei	X
fis-1265	46	8	dy	dy	X
fis-1265	46	9	h	h	PROPN
fis-1265	47	1	sv	sv	PROPN
fis-1265	47	2	sv	sv	PROPN
fis-1265	48	1	k	k	PROPN
fis-1265	48	2	dy	dy	PROPN
fis-1265	48	3	h	h	NOUN
fis-1265	49	1	d	d	PROPN
fis-1265	50	1	d	d	X
fis-1265	50	2	m	m	VERB
fis-1265	50	3	a	a	DET
fis-1265	50	4	dy	dy	NOUN
fis-1265	50	5	ah	ah	INTJ
fis-1265	50	6			NOUN
fis-1265	50	7			PROPN
fis-1265	50	8			PROPN
fis-1265	50	9			NOUN
fis-1265	50	10			ADP
fis-1265	50	11			NOUN
fis-1265	50	12			ADP
fis-1265	50	13			PROPN
fis-1265	50	14			NOUN
fis-1265	51	1			ADJ
fis-1265	51	2			PRON
fis-1265	52	1			ADJ
fis-1265	52	2			NOUN
fis-1265	53	1			NOUN
fis-1265	53	2			X
fis-1265	53	3			X
fis-1265	53	4	(	(	PUNCT
fis-1265	53	5	2	2	X
fis-1265	53	6	)	)	PUNCT
fis-1265	53	7	where	where	SCONJ
fis-1265	53	8	e	e	NOUN
fis-1265	53	9	is	be	AUX
fis-1265	53	10	the	the	DET
fis-1265	53	11	young	young	ADJ
fis-1265	53	12	’s	’s	PART
fis-1265	53	13	modulus	modulus	NOUN
fis-1265	53	14	,	,	PUNCT
fis-1265	53	15	a	a	PRON
fis-1265	53	16	and	and	CCONJ
fis-1265	53	17	i	i	PRON
fis-1265	53	18	the	the	DET
fis-1265	53	19	area	area	NOUN
fis-1265	53	20	and	and	CCONJ
fis-1265	53	21	the	the	DET
fis-1265	53	22	momentum	momentum	NOUN
fis-1265	53	23	of	of	ADP
fis-1265	53	24	inertia	inertia	NOUN
fis-1265	53	25	of	of	ADP
fis-1265	53	26	the	the	DET
fis-1265	53	27	cross	cross	NOUN
fis-1265	53	28	section	section	NOUN
fis-1265	53	29	,	,	PUNCT
fis-1265	53	30	0	0	PROPN
fis-1265	53	31	is	be	AUX
fis-1265	53	32	the	the	DET
fis-1265	53	33	dielectric	dielectric	ADJ
fis-1265	53	34	permittivity	permittivity	NOUN
fis-1265	53	35	,	,	PUNCT
fis-1265	53	36	s	s	PART
fis-1265	53	37	is	be	AUX
fis-1265	53	38	the	the	DET
fis-1265	53	39	out	out	NOUN
fis-1265	53	40	of	of	ADP
fis-1265	53	41	plane	plane	NOUN
fis-1265	53	42	thickness	thickness	NOUN
fis-1265	53	43	and	and	CCONJ
fis-1265	53	44			ADP
fis-1265	53	45	the	the	DET
fis-1265	53	46	mass	mass	NOUN
fis-1265	53	47	density	density	NOUN
fis-1265	53	48	.	.	PUNCT
fis-1265	54	1	v.	v.	ADP
fis-1265	54	2	zega	zega	PROPN
fis-1265	54	3	et	et	PROPN
fis-1265	54	4	alii	alii	PROPN
fis-1265	54	5	,	,	PUNCT
fis-1265	54	6	frattura	frattura	PROPN
fis-1265	54	7	ed	ed	PROPN
fis-1265	54	8	integrità	integrità	PROPN
fis-1265	54	9	strutturale	strutturale	PROPN
fis-1265	54	10	,	,	PUNCT
fis-1265	54	11	29	29	NUM
fis-1265	54	12	(	(	PUNCT
fis-1265	54	13	2014	2014	NUM
fis-1265	54	14	)	)	PUNCT
fis-1265	54	15	334	334	NUM
fis-1265	54	16	-	-	SYM
fis-1265	54	17	342	342	NUM
fis-1265	54	18	;	;	PUNCT
fis-1265	54	19	doi	doi	NOUN
fis-1265	54	20	:	:	PUNCT
fis-1265	54	21	10.3221	10.3221	NUM
fis-1265	54	22	/	/	SYM
fis-1265	54	23	igf	igf	PROPN
fis-1265	54	24	-	-	PUNCT
fis-1265	54	25	esis.29.29	esis.29.29	PROPN
fis-1265	54	26	337	337	NUM
fis-1265	54	27	when	when	SCONJ
fis-1265	54	28	,	,	PUNCT
fis-1265	54	29	due	due	ADP
fis-1265	54	30	to	to	ADP
fis-1265	54	31	an	an	DET
fis-1265	54	32	external	external	ADJ
fis-1265	54	33	acceleration	acceleration	NOUN
fis-1265	54	34	or	or	CCONJ
fis-1265	54	35	yaw	yaw	NOUN
fis-1265	54	36	angular	angular	ADJ
fis-1265	54	37	velocity	velocity	NOUN
fis-1265	54	38	,	,	PUNCT
fis-1265	54	39	the	the	DET
fis-1265	54	40	in	in	ADP
fis-1265	54	41	-	-	PUNCT
fis-1265	54	42	plane	plane	NOUN
fis-1265	54	43	inertia	inertia	NOUN
fis-1265	54	44	force	force	NOUN
fis-1265	54	45	or	or	CCONJ
fis-1265	54	46	the	the	DET
fis-1265	54	47	coriolis	corioli	NOUN
fis-1265	54	48	’	'	PUNCT
fis-1265	54	49	force	force	NOUN
fis-1265	54	50	is	be	AUX
fis-1265	54	51	applied	apply	VERB
fis-1265	54	52	to	to	ADP
fis-1265	54	53	the	the	DET
fis-1265	54	54	proof	proof	NOUN
fis-1265	54	55	masses	masse	NOUN
fis-1265	54	56	,	,	PUNCT
fis-1265	54	57	an	an	DET
fis-1265	54	58	axial	axial	ADJ
fis-1265	54	59	force	force	NOUN
fis-1265	54	60	n	n	PRON
fis-1265	54	61	is	be	AUX
fis-1265	54	62	exerted	exert	VERB
fis-1265	54	63	on	on	ADP
fis-1265	54	64	the	the	DET
fis-1265	54	65	resonators	resonator	NOUN
fis-1265	54	66	and	and	CCONJ
fis-1265	54	67	their	their	PRON
fis-1265	54	68	frequency	frequency	NOUN
fis-1265	54	69	changes	change	NOUN
fis-1265	54	70	according	accord	VERB
fis-1265	54	71	due	due	ADP
fis-1265	54	72	to	to	ADP
fis-1265	54	73	an	an	DET
fis-1265	54	74	additional	additional	ADJ
fis-1265	54	75	geometric	geometric	ADJ
fis-1265	54	76	stiffness	stiffness	NOUN
fis-1265	54	77	term	term	NOUN
fis-1265	54	78	gk	gk	PROPN
fis-1265	54	79			PROPN
fis-1265	54	80	2	2	NOUN
fis-1265	54	81	0	0	NUM
fis-1265	54	82	4.88h	4.88h	NUM
fis-1265	54	83	gk	gk	NOUN
fis-1265	54	84	n	n	NOUN
fis-1265	54	85	dy	dy	NOUN
fis-1265	54	86	n	n	PROPN
fis-1265	54	87	h	h	NOUN
fis-1265	54	88			NOUN
fis-1265	54	89			PROPN
fis-1265	55	1			PROPN
fis-1265	55	2	(	(	PUNCT
fis-1265	55	3	3	3	NUM
fis-1265	55	4	)	)	PUNCT
fis-1265	55	5	in	in	ADP
fis-1265	55	6	the	the	DET
fis-1265	55	7	case	case	NOUN
fis-1265	55	8	of	of	ADP
fis-1265	55	9	a	a	DET
fis-1265	55	10	tensile	tensile	NOUN
fis-1265	55	11	axial	axial	ADJ
fis-1265	55	12	load	load	NOUN
fis-1265	55	13	n	n	ADP
fis-1265	55	14	the	the	DET
fis-1265	55	15	beam	beam	NOUN
fis-1265	55	16	oscillation	oscillation	NOUN
fis-1265	55	17	frequency	frequency	NOUN
fis-1265	55	18	increases	increase	NOUN
fis-1265	55	19	while	while	SCONJ
fis-1265	55	20	in	in	ADP
fis-1265	55	21	the	the	DET
fis-1265	55	22	case	case	NOUN
fis-1265	55	23	of	of	ADP
fis-1265	55	24	a	a	DET
fis-1265	55	25	compressive	compressive	ADJ
fis-1265	55	26	load	load	NOUN
fis-1265	55	27	it	it	PRON
fis-1265	55	28	decreases	decrease	VERB
fis-1265	55	29	[	[	X
fis-1265	55	30	14	14	NUM
fis-1265	55	31	-	-	SYM
fis-1265	55	32	16	16	NUM
fis-1265	55	33	]	]	PUNCT
fis-1265	55	34	according	accord	VERB
fis-1265	55	35	to	to	ADP
fis-1265	55	36	the	the	DET
fis-1265	55	37	relation	relation	NOUN
fis-1265	55	38	:	:	PUNCT
fis-1265	55	39	0	0	NUM
fis-1265	56	1	1	1	NUM
fis-1265	56	2	4.88	4.88	NUM
fis-1265	56	3	1	1	NUM
fis-1265	56	4	2	2	NUM
fis-1265	56	5	(	(	PUNCT
fis-1265	56	6	)	)	PUNCT
fis-1265	56	7	m	m	VERB
fis-1265	56	8	g	g	NOUN
fis-1265	56	9	e	e	NOUN
fis-1265	56	10	m	m	NOUN
fis-1265	56	11	e	e	NOUN
fis-1265	56	12	k	k	PROPN
fis-1265	56	13	k	k	PROPN
fis-1265	57	1	k	k	PROPN
fis-1265	57	2	f	f	PROPN
fis-1265	58	1	f	f	PROPN
fis-1265	58	2	n	n	INTJ
fis-1265	58	3	m	m	VERB
fis-1265	58	4	h	h	NOUN
fis-1265	58	5	k	k	PROPN
fis-1265	58	6	k	k	PROPN
fis-1265	58	7			VERB
fis-1265	58	8			PROPN
fis-1265	58	9			PROPN
fis-1265	58	10			PROPN
fis-1265	58	11			ADJ
fis-1265	58	12			X
fis-1265	58	13	(	(	PUNCT
fis-1265	58	14	4	4	NUM
fis-1265	58	15	)	)	PUNCT
fis-1265	58	16	since	since	SCONJ
fis-1265	58	17	the	the	DET
fis-1265	58	18	resonating	resonate	VERB
fis-1265	58	19	beam	beam	NOUN
fis-1265	58	20	is	be	AUX
fis-1265	58	21	very	very	ADV
fis-1265	58	22	slender	slender	ADJ
fis-1265	58	23	and	and	CCONJ
fis-1265	58	24	the	the	DET
fis-1265	58	25	gap	gap	NOUN
fis-1265	58	26	d0	d0	NOUN
fis-1265	58	27	is	be	AUX
fis-1265	58	28	very	very	ADV
fis-1265	58	29	small	small	ADJ
fis-1265	58	30	,	,	PUNCT
fis-1265	58	31	nonlinear	nonlinear	ADJ
fis-1265	58	32	effects	effect	NOUN
fis-1265	58	33	can	can	AUX
fis-1265	58	34	appear	appear	VERB
fis-1265	58	35	due	due	ADJ
fis-1265	58	36	to	to	ADP
fis-1265	58	37	both	both	CCONJ
fis-1265	58	38	geometrical	geometrical	ADJ
fis-1265	58	39	and	and	CCONJ
fis-1265	58	40	electrostatic	electrostatic	ADJ
fis-1265	58	41	effects	effect	NOUN
fis-1265	58	42	.	.	PUNCT
fis-1265	59	1	however	however	ADV
fis-1265	59	2	,	,	PUNCT
fis-1265	59	3	the	the	DET
fis-1265	59	4	presence	presence	NOUN
fis-1265	59	5	of	of	ADP
fis-1265	59	6	the	the	DET
fis-1265	59	7	little	little	ADJ
fis-1265	59	8	horizontal	horizontal	ADJ
fis-1265	59	9	part	part	NOUN
fis-1265	59	10	of	of	ADP
fis-1265	59	11	length	length	NOUN
fis-1265	59	12	h	h	NOUN
fis-1265	59	13	,	,	PUNCT
fis-1265	59	14	see	see	VERB
fis-1265	59	15	fig	fig	NOUN
fis-1265	59	16	.	.	PUNCT
fis-1265	60	1	2(a	2(a	NUM
fis-1265	60	2	)	)	PUNCT
fis-1265	61	1	,	,	PUNCT
fis-1265	61	2	partially	partially	ADV
fis-1265	61	3	releases	release	VERB
fis-1265	61	4	the	the	DET
fis-1265	61	5	axial	axial	ADJ
fis-1265	61	6	constraint	constraint	NOUN
fis-1265	61	7	,	,	PUNCT
fis-1265	61	8	thus	thus	ADV
fis-1265	61	9	lowering	lower	VERB
fis-1265	61	10	the	the	DET
fis-1265	61	11	higher	high	ADJ
fis-1265	61	12	order	order	NOUN
fis-1265	61	13	mechanical	mechanical	ADJ
fis-1265	61	14	stiffness	stiffness	NOUN
fis-1265	61	15	terms	term	NOUN
fis-1265	61	16	and	and	CCONJ
fis-1265	61	17	widening	widen	VERB
fis-1265	61	18	the	the	DET
fis-1265	61	19	regime	regime	NOUN
fis-1265	61	20	of	of	ADP
fis-1265	61	21	linear	linear	PROPN
fis-1265	61	22	oscillation	oscillation	NOUN
fis-1265	61	23	.	.	PUNCT
fis-1265	62	1	the	the	DET
fis-1265	62	2	electrostatic	electrostatic	ADJ
fis-1265	62	3	stiffness	stiffness	NOUN
fis-1265	62	4	nonlinearities	nonlinearitie	NOUN
fis-1265	62	5	can	can	AUX
fis-1265	62	6	be	be	AUX
fis-1265	62	7	reduced	reduce	VERB
fis-1265	62	8	by	by	ADP
fis-1265	62	9	lowering	lower	VERB
fis-1265	62	10	the	the	DET
fis-1265	62	11	actuation	actuation	NOUN
fis-1265	62	12	voltage	voltage	NOUN
fis-1265	62	13	va(t	va(t	NOUN
fis-1265	62	14	)	)	PUNCT
fis-1265	62	15	;	;	PUNCT
fis-1265	62	16	the	the	DET
fis-1265	62	17	sensor	sensor	NOUN
fis-1265	62	18	proposed	propose	VERB
fis-1265	62	19	in	in	ADP
fis-1265	62	20	this	this	DET
fis-1265	62	21	work	work	NOUN
fis-1265	62	22	will	will	AUX
fis-1265	62	23	be	be	AUX
fis-1265	62	24	actuated	actuate	VERB
fis-1265	62	25	in	in	ADP
fis-1265	62	26	the	the	DET
fis-1265	62	27	linear	linear	ADJ
fis-1265	62	28	regime	regime	NOUN
fis-1265	62	29	.	.	PUNCT
fis-1265	63	1	a	a	DET
fis-1265	63	2	detailed	detailed	ADJ
fis-1265	63	3	discussion	discussion	NOUN
fis-1265	63	4	on	on	ADP
fis-1265	63	5	the	the	DET
fis-1265	63	6	nonlinear	nonlinear	ADJ
fis-1265	63	7	behavior	behavior	NOUN
fis-1265	63	8	of	of	ADP
fis-1265	63	9	the	the	DET
fis-1265	63	10	resonator	resonator	NOUN
fis-1265	63	11	can	can	AUX
fis-1265	63	12	be	be	AUX
fis-1265	63	13	found	find	VERB
fis-1265	63	14	in	in	ADP
fis-1265	63	15	[	[	X
fis-1265	63	16	13,17	13,17	NOUN
fis-1265	63	17	]	]	PUNCT
fis-1265	63	18	.	.	PUNCT
fis-1265	64	1	the	the	DET
fis-1265	64	2	other	other	ADJ
fis-1265	64	3	resonators	resonator	NOUN
fis-1265	64	4	included	include	VERB
fis-1265	64	5	in	in	ADP
fis-1265	64	6	the	the	DET
fis-1265	64	7	device	device	NOUN
fis-1265	64	8	are	be	AUX
fis-1265	64	9	torsional	torsional	ADJ
fis-1265	64	10	resonators	resonator	NOUN
fis-1265	64	11	constituted	constitute	VERB
fis-1265	64	12	by	by	ADP
fis-1265	64	13	a	a	DET
fis-1265	64	14	small	small	ADJ
fis-1265	64	15	mass	mass	NOUN
fis-1265	64	16	of	of	ADP
fis-1265	64	17	in	in	ADP
fis-1265	64	18	-	-	PUNCT
fis-1265	64	19	plane	plane	NOUN
fis-1265	64	20	dimensions	dimension	NOUN
fis-1265	64	21	2b	2b	NOUN
fis-1265	64	22	l	l	PROPN
fis-1265	64	23	and	and	CCONJ
fis-1265	64	24	out	out	ADP
fis-1265	64	25	-	-	PUNCT
fis-1265	64	26	of	of	ADP
fis-1265	64	27	-	-	PUNCT
fis-1265	64	28	plane	plane	NOUN
fis-1265	64	29	thickness	thickness	NOUN
fis-1265	64	30	s	s	VERB
fis-1265	64	31	connected	connect	VERB
fis-1265	64	32	to	to	ADP
fis-1265	64	33	the	the	DET
fis-1265	64	34	proof	proof	NOUN
fis-1265	64	35	mass	mass	NOUN
fis-1265	64	36	by	by	ADP
fis-1265	64	37	two	two	NUM
fis-1265	64	38	folded	fold	VERB
fis-1265	64	39	torsional	torsional	ADJ
fis-1265	64	40	springs	spring	NOUN
fis-1265	64	41	,	,	PUNCT
fis-1265	64	42	which	which	PRON
fis-1265	64	43	allow	allow	VERB
fis-1265	64	44	for	for	ADP
fis-1265	64	45	its	its	PRON
fis-1265	64	46	outof	outof	ADJ
fis-1265	64	47	-	-	PUNCT
fis-1265	64	48	plane	plane	NOUN
fis-1265	64	49	rotation	rotation	NOUN
fis-1265	64	50	(	(	PUNCT
fis-1265	64	51	,	,	PUNCT
fis-1265	64	52	)	)	PUNCT
fis-1265	64	53	x	x	X
fis-1265	64	54	t	t	NOUN
fis-1265	64	55	(	(	PUNCT
fis-1265	64	56	see	see	VERB
fis-1265	64	57	fig	fig	NOUN
fis-1265	64	58	.	.	PUNCT
fis-1265	65	1	2(b	2(b	NUM
fis-1265	65	2	)	)	PUNCT
fis-1265	65	3	)	)	PUNCT
fis-1265	65	4	.	.	PUNCT
fis-1265	66	1	when	when	SCONJ
fis-1265	66	2	in	in	ADP
fis-1265	66	3	the	the	DET
fis-1265	66	4	rest	rest	NOUN
fis-1265	66	5	position	position	NOUN
fis-1265	66	6	,	,	PUNCT
fis-1265	66	7	the	the	DET
fis-1265	66	8	mass	mass	NOUN
fis-1265	66	9	is	be	AUX
fis-1265	66	10	at	at	ADP
fis-1265	66	11	distance	distance	NOUN
fis-1265	66	12	0	0	NUM
fis-1265	66	13	g	g	NOUN
fis-1265	66	14	from	from	ADP
fis-1265	66	15	both	both	CCONJ
fis-1265	66	16	the	the	DET
fis-1265	66	17	electrodes	electrode	NOUN
fis-1265	66	18	(	(	PUNCT
fis-1265	66	19	see	see	VERB
fis-1265	66	20	fig	fig	NOUN
fis-1265	66	21	.	.	PUNCT
fis-1265	67	1	2(b	2(b	NUM
fis-1265	67	2	)	)	PUNCT
fis-1265	67	3	)	)	PUNCT
fis-1265	68	1	and	and	CCONJ
fis-1265	68	2	the	the	DET
fis-1265	68	3	torsional	torsional	ADJ
fis-1265	68	4	resonator	resonator	NOUN
fis-1265	68	5	has	have	VERB
fis-1265	68	6	the	the	DET
fis-1265	68	7	nominal	nominal	ADJ
fis-1265	68	8	frequency	frequency	NOUN
fis-1265	68	9	0	0	ADV
fis-1265	68	10	0	0	NUM
fis-1265	68	11	1	1	NUM
fis-1265	68	12	2	2	NUM
fis-1265	68	13	m	m	NOUN
fis-1265	68	14	e	e	NOUN
fis-1265	68	15	mass	mass	PROPN
fis-1265	68	16	k	k	PROPN
fis-1265	68	17	k	k	PROPN
fis-1265	68	18	j	j	PROPN
fis-1265	68	19			PROPN
fis-1265	68	20			PROPN
fis-1265	68	21			ADP
fis-1265	68	22			PROPN
fis-1265	68	23			NUM
fis-1265	68	24	(	(	PUNCT
fis-1265	68	25	5	5	NUM
fis-1265	68	26	)	)	PUNCT
fis-1265	68	27	with	with	ADP
fis-1265	68	28			NOUN
fis-1265	68	29	2	2	ADJ
fis-1265	68	30	3	3	NUM
fis-1265	68	31	30	30	NUM
fis-1265	68	32	3	3	NUM
fis-1265	68	33	0	0	NUM
fis-1265	68	34	22	22	NUM
fis-1265	68	35	,	,	PUNCT
fis-1265	68	36	3	3	NUM
fis-1265	68	37	m	m	NOUN
fis-1265	68	38	e	e	NOUN
fis-1265	68	39	p	p	PROPN
fis-1265	68	40	lgj	lgj	VERB
fis-1265	69	1	k	k	PROPN
fis-1265	70	1	k	k	PROPN
fis-1265	71	1	v	v	PROPN
fis-1265	71	2	b	b	PROPN
fis-1265	71	3	c	c	NOUN
fis-1265	71	4	l	l	NOUN
fis-1265	71	5	g	g	PROPN
fis-1265	71	6			PROPN
fis-1265	72	1			NUM
fis-1265	72	2			PROPN
fis-1265	72	3			NOUN
fis-1265	72	4	where	where	SCONJ
fis-1265	72	5	j	j	PROPN
fis-1265	72	6	is	be	AUX
fis-1265	72	7	the	the	DET
fis-1265	72	8	torsional	torsional	ADJ
fis-1265	72	9	momentum	momentum	NOUN
fis-1265	72	10	of	of	ADP
fis-1265	72	11	inertia	inertia	NOUN
fis-1265	72	12	,	,	PUNCT
fis-1265	72	13	massj	massj	PROPN
fis-1265	72	14	is	be	AUX
fis-1265	72	15	the	the	DET
fis-1265	72	16	centroidal	centroidal	PROPN
fis-1265	72	17	mass	mass	PROPN
fis-1265	72	18	moment	moment	NOUN
fis-1265	72	19	of	of	ADP
fis-1265	72	20	inertia	inertia	NOUN
fis-1265	72	21	of	of	ADP
fis-1265	72	22	the	the	DET
fis-1265	72	23	rigid	rigid	ADJ
fis-1265	72	24	mass	mass	NOUN
fis-1265	72	25	,	,	PUNCT
fis-1265	72	26	l	l	PROPN
fis-1265	72	27	is	be	AUX
fis-1265	72	28	the	the	DET
fis-1265	72	29	total	total	ADJ
fis-1265	72	30	length	length	NOUN
fis-1265	72	31	of	of	ADP
fis-1265	72	32	one	one	NUM
fis-1265	72	33	of	of	ADP
fis-1265	72	34	the	the	DET
fis-1265	72	35	folded	fold	VERB
fis-1265	72	36	torsional	torsional	ADJ
fis-1265	72	37	springs	spring	NOUN
fis-1265	72	38	and	and	CCONJ
fis-1265	72	39	g	g	PROPN
fis-1265	72	40	is	be	AUX
fis-1265	72	41	the	the	DET
fis-1265	72	42	shear	shear	NOUN
fis-1265	72	43	elastic	elastic	ADJ
fis-1265	72	44	modulus	modulus	NOUN
fis-1265	72	45	.	.	PUNCT
fis-1265	73	1	the	the	DET
fis-1265	73	2	sensing	sense	VERB
fis-1265	73	3	electrode	electrode	NOUN
fis-1265	73	4	is	be	AUX
fis-1265	73	5	usually	usually	ADV
fis-1265	73	6	connected	connect	VERB
fis-1265	73	7	to	to	ADP
fis-1265	73	8	a	a	DET
fis-1265	73	9	virtual	virtual	ADJ
fis-1265	73	10	ground	ground	NOUN
fis-1265	73	11	at	at	ADP
fis-1265	73	12	zero	zero	NUM
fis-1265	73	13	voltage	voltage	NOUN
fis-1265	73	14	while	while	SCONJ
fis-1265	73	15	the	the	DET
fis-1265	73	16	mass	mass	NOUN
fis-1265	73	17	is	be	AUX
fis-1265	73	18	kept	keep	VERB
fis-1265	73	19	at	at	ADP
fis-1265	73	20	the	the	DET
fis-1265	73	21	polarization	polarization	NOUN
fis-1265	73	22	fixed	fix	VERB
fis-1265	73	23	voltage	voltage	NOUN
fis-1265	73	24	vp	vp	PROPN
fis-1265	73	25	(	(	PUNCT
fis-1265	73	26	see	see	VERB
fis-1265	73	27	fig	fig	NOUN
fis-1265	73	28	.	.	PUNCT
fis-1265	74	1	2(b	2(b	NUM
fis-1265	74	2	)	)	PUNCT
fis-1265	74	3	)	)	PUNCT
fis-1265	74	4	.	.	PUNCT
fis-1265	75	1	by	by	ADP
fis-1265	75	2	applying	apply	VERB
fis-1265	75	3	a	a	DET
fis-1265	75	4	small	small	ADJ
fis-1265	75	5	variable	variable	ADJ
fis-1265	75	6	voltage	voltage	NOUN
fis-1265	75	7	va(t	va(t	NOUN
fis-1265	75	8	)	)	PUNCT
fis-1265	75	9	to	to	ADP
fis-1265	75	10	the	the	DET
fis-1265	75	11	driving	driving	NOUN
fis-1265	75	12	electrode	electrode	NOUN
fis-1265	75	13	the	the	DET
fis-1265	75	14	mass	mass	NOUN
fis-1265	75	15	is	be	AUX
fis-1265	75	16	electrostatically	electrostatically	ADV
fis-1265	75	17	actuated	actuate	VERB
fis-1265	75	18	and	and	CCONJ
fis-1265	75	19	can	can	AUX
fis-1265	75	20	dynamically	dynamically	ADV
fis-1265	75	21	vibrate	vibrate	VERB
fis-1265	75	22	.	.	PUNCT
fis-1265	76	1	when	when	SCONJ
fis-1265	76	2	,	,	PUNCT
fis-1265	76	3	due	due	ADP
fis-1265	76	4	to	to	ADP
fis-1265	76	5	external	external	ADJ
fis-1265	76	6	actions	action	NOUN
fis-1265	76	7	,	,	PUNCT
fis-1265	76	8	the	the	DET
fis-1265	76	9	proof	proof	NOUN
fis-1265	76	10	masses	masses	AUX
fis-1265	76	11	tilt	tilt	VERB
fis-1265	76	12	,	,	PUNCT
fis-1265	76	13	there	there	PRON
fis-1265	76	14	is	be	VERB
fis-1265	76	15	a	a	DET
fis-1265	76	16	change	change	NOUN
fis-1265	76	17	of	of	ADP
fis-1265	76	18	gap	gap	NOUN
fis-1265	76	19	0	0	NUM
fis-1265	76	20	g	g	NOUN
fis-1265	76	21	between	between	ADP
fis-1265	76	22	the	the	DET
fis-1265	76	23	resonators	resonator	NOUN
fis-1265	76	24	and	and	CCONJ
fis-1265	76	25	the	the	DET
fis-1265	76	26	electrodes	electrode	NOUN
fis-1265	76	27	and	and	CCONJ
fis-1265	76	28	the	the	DET
fis-1265	76	29	frequency	frequency	NOUN
fis-1265	76	30	changes	change	NOUN
fis-1265	76	31	according	accord	VERB
fis-1265	76	32	to	to	ADP
fis-1265	76	33	equation	equation	NOUN
fis-1265	76	34	(	(	PUNCT
fis-1265	76	35	5	5	NUM
fis-1265	76	36	)	)	PUNCT
fis-1265	76	37	.	.	PUNCT
fis-1265	77	1	as	as	ADP
fis-1265	77	2	for	for	ADP
fis-1265	77	3	the	the	DET
fis-1265	77	4	bending	bend	VERB
fis-1265	77	5	resonators	resonator	NOUN
fis-1265	77	6	nonlinear	nonlinear	ADJ
fis-1265	77	7	effects	effect	NOUN
fis-1265	77	8	can	can	AUX
fis-1265	77	9	appear	appear	VERB
fis-1265	77	10	for	for	ADP
fis-1265	77	11	high	high	ADJ
fis-1265	77	12	values	value	NOUN
fis-1265	77	13	of	of	ADP
fis-1265	77	14	va(t	va(t	NOUN
fis-1265	77	15	)	)	PUNCT
fis-1265	77	16	due	due	ADP
fis-1265	77	17	to	to	ADP
fis-1265	77	18	higher	high	ADJ
fis-1265	77	19	order	order	NOUN
fis-1265	77	20	terms	term	NOUN
fis-1265	77	21	in	in	ADP
fis-1265	77	22	the	the	DET
fis-1265	77	23	electrostatic	electrostatic	ADJ
fis-1265	77	24	stiffness	stiffness	NOUN
fis-1265	77	25	.	.	PUNCT
fis-1265	78	1	the	the	DET
fis-1265	78	2	nonlinear	nonlinear	ADJ
fis-1265	78	3	behavior	behavior	NOUN
fis-1265	78	4	and	and	CCONJ
fis-1265	78	5	the	the	DET
fis-1265	78	6	range	range	NOUN
fis-1265	78	7	of	of	ADP
fis-1265	78	8	actuation	actuation	NOUN
fis-1265	78	9	available	available	ADJ
fis-1265	78	10	to	to	PART
fis-1265	78	11	ensure	ensure	VERB
fis-1265	78	12	operation	operation	NOUN
fis-1265	78	13	in	in	ADP
fis-1265	78	14	the	the	DET
fis-1265	78	15	linear	linear	NOUN
fis-1265	78	16	regime	regime	NOUN
fis-1265	78	17	are	be	AUX
fis-1265	78	18	studied	study	VERB
fis-1265	78	19	in	in	ADP
fis-1265	78	20	[	[	X
fis-1265	78	21	18	18	NUM
fis-1265	78	22	]	]	PUNCT
fis-1265	78	23	.	.	PUNCT
fis-1265	79	1	device	device	NOUN
fis-1265	79	2	operation	operation	NOUN
fis-1265	79	3	principle	principle	NOUN
fis-1265	79	4	during	during	ADP
fis-1265	79	5	the	the	DET
fis-1265	79	6	gyroscope	gyroscope	NOUN
fis-1265	79	7	-	-	PUNCT
fis-1265	79	8	accelerometer	accelerometer	NOUN
fis-1265	79	9	functioning	function	VERB
fis-1265	79	10	the	the	DET
fis-1265	79	11	inertial	inertial	ADJ
fis-1265	79	12	proof	proof	NOUN
fis-1265	79	13	masses	masse	NOUN
fis-1265	79	14	are	be	AUX
fis-1265	79	15	kept	keep	VERB
fis-1265	79	16	in	in	ADP
fis-1265	79	17	resonance	resonance	NOUN
fis-1265	79	18	according	accord	VERB
fis-1265	79	19	to	to	ADP
fis-1265	79	20	their	their	PRON
fis-1265	79	21	inplane	inplane	NOUN
fis-1265	79	22	translational	translational	ADJ
fis-1265	79	23	mode	mode	NOUN
fis-1265	79	24	in	in	ADP
fis-1265	79	25	x	x	PUNCT
fis-1265	79	26	direction	direction	NOUN
fis-1265	79	27	by	by	ADP
fis-1265	79	28	means	mean	NOUN
fis-1265	79	29	of	of	ADP
fis-1265	79	30	electrostatic	electrostatic	ADJ
fis-1265	79	31	driving	driving	NOUN
fis-1265	79	32	implemented	implement	VERB
fis-1265	79	33	by	by	ADP
fis-1265	79	34	the	the	DET
fis-1265	79	35	respective	respective	ADJ
fis-1265	79	36	driving	driving	NOUN
fis-1265	79	37	electrodes	electrode	NOUN
fis-1265	79	38	(	(	PUNCT
fis-1265	79	39	see	see	VERB
fis-1265	79	40	fig	fig	NOUN
fis-1265	79	41	.	.	PUNCT
fis-1265	80	1	1	1	NUM
fis-1265	80	2	)	)	PUNCT
fis-1265	80	3	.	.	PUNCT
fis-1265	81	1	also	also	ADV
fis-1265	81	2	the	the	DET
fis-1265	81	3	bending	bend	VERB
fis-1265	81	4	resonator	resonator	NOUN
fis-1265	81	5	elements	element	NOUN
fis-1265	81	6	(	(	PUNCT
fis-1265	81	7	labeled	label	VERB
fis-1265	81	8	i	i	PROPN
fis-1265	81	9	,	,	PUNCT
fis-1265	81	10	ii	ii	PROPN
fis-1265	81	11	,	,	PUNCT
fis-1265	81	12	iii	iii	PROPN
fis-1265	81	13	,	,	PUNCT
fis-1265	81	14	iv	iv	X
fis-1265	81	15	in	in	ADP
fis-1265	81	16	fig	fig	NOUN
fis-1265	81	17	.	.	PUNCT
fis-1265	82	1	3	3	X
fis-1265	82	2	)	)	PUNCT
fis-1265	82	3	are	be	AUX
fis-1265	82	4	kept	keep	VERB
fis-1265	82	5	in	in	ADP
fis-1265	82	6	resonance	resonance	NOUN
fis-1265	82	7	according	accord	VERB
fis-1265	82	8	to	to	ADP
fis-1265	82	9	the	the	DET
fis-1265	82	10	first	first	ADJ
fis-1265	82	11	flexural	flexural	ADJ
fis-1265	82	12	mode	mode	NOUN
fis-1265	82	13	in	in	ADP
fis-1265	82	14	the	the	DET
fis-1265	82	15	plane	plane	NOUN
fis-1265	82	16	along	along	ADP
fis-1265	82	17	the	the	DET
fis-1265	82	18	first	first	ADJ
fis-1265	82	19	axis	axis	NOUN
fis-1265	82	20	x	x	X
fis-1265	82	21	,	,	PUNCT
fis-1265	82	22	by	by	ADP
fis-1265	82	23	means	mean	NOUN
fis-1265	82	24	of	of	ADP
fis-1265	82	25	electrostatic	electrostatic	ADJ
fis-1265	82	26	interaction	interaction	NOUN
fis-1265	82	27	with	with	ADP
fis-1265	82	28	the	the	DET
fis-1265	82	29	driving	driving	NOUN
fis-1265	82	30	electrodes	electrode	NOUN
fis-1265	82	31	.	.	PUNCT
fis-1265	83	1	in	in	ADP
fis-1265	83	2	absence	absence	NOUN
fis-1265	83	3	of	of	ADP
fis-1265	83	4	an	an	DET
fis-1265	83	5	external	external	ADJ
fis-1265	83	6	angular	angular	ADJ
fis-1265	83	7	velocity	velocity	NOUN
fis-1265	83	8	or	or	CCONJ
fis-1265	83	9	linear	linear	ADJ
fis-1265	83	10	acceleration	acceleration	NOUN
fis-1265	83	11	,	,	PUNCT
fis-1265	83	12	all	all	DET
fis-1265	83	13	resonators	resonator	NOUN
fis-1265	83	14	have	have	VERB
fis-1265	83	15	the	the	DET
fis-1265	83	16	same	same	ADJ
fis-1265	83	17	nominal	nominal	ADJ
fis-1265	83	18	frequency	frequency	NOUN
fis-1265	83	19	0f	0f	NOUN
fis-1265	83	20	,	,	PUNCT
fis-1265	83	21	see	see	VERB
fis-1265	83	22	eq	eq	NOUN
fis-1265	83	23	.	.	PUNCT
fis-1265	84	1	(	(	PUNCT
fis-1265	84	2	1	1	NUM
fis-1265	84	3	)	)	PUNCT
fis-1265	84	4	.	.	PUNCT
fis-1265	85	1	when	when	SCONJ
fis-1265	85	2	an	an	DET
fis-1265	85	3	external	external	ADJ
fis-1265	85	4	yaw	yaw	NOUN
fis-1265	85	5	angular	angular	ADJ
fis-1265	85	6	velocity	velocity	NOUN
fis-1265	85	7	ωz	ωz	ADV
fis-1265	85	8	is	be	AUX
fis-1265	85	9	applied	apply	VERB
fis-1265	85	10	,	,	PUNCT
fis-1265	85	11	two	two	NUM
fis-1265	85	12	coriolis	corioli	NOUN
fis-1265	85	13	’	'	PUNCT
fis-1265	85	14	forces	force	NOUN
fis-1265	85	15	fc	fc	PROPN
fis-1265	85	16	originate	originate	VERB
fis-1265	85	17	on	on	ADP
fis-1265	85	18	the	the	DET
fis-1265	85	19	two	two	NUM
fis-1265	85	20	inertial	inertial	ADJ
fis-1265	85	21	masses	masse	NOUN
fis-1265	85	22	;	;	PUNCT
fis-1265	85	23	they	they	PRON
fis-1265	85	24	are	be	AUX
fis-1265	85	25	directed	direct	VERB
fis-1265	85	26	along	along	ADP
fis-1265	85	27	the	the	DET
fis-1265	85	28	axis	axis	NOUN
fis-1265	85	29	y	y	PROPN
fis-1265	85	30	,	,	PUNCT
fis-1265	85	31	have	have	VERB
fis-1265	85	32	opposite	opposite	ADJ
fis-1265	85	33	signs	sign	NOUN
fis-1265	85	34	(	(	PUNCT
fis-1265	85	35	see	see	VERB
fis-1265	85	36	fig	fig	NOUN
fis-1265	85	37	.	.	PUNCT
fis-1265	86	1	3(a	3(a	NUM
fis-1265	86	2	)	)	PUNCT
fis-1265	86	3	)	)	PUNCT
fis-1265	87	1	and	and	CCONJ
fis-1265	87	2	have	have	AUX
fis-1265	87	3	modulus	modulus	NOUN
fis-1265	87	4	:	:	PUNCT
fis-1265	87	5	2c	2c	NUM
fis-1265	87	6	zf	zf	PROPN
fis-1265	87	7	m	m	PROPN
fis-1265	87	8	x	x	PROPN
fis-1265	87	9			PROPN
fis-1265	87	10			NOUN
fis-1265	87	11	(	(	PUNCT
fis-1265	87	12	6	6	NUM
fis-1265	87	13	)	)	PUNCT
fis-1265	87	14	where	where	SCONJ
fis-1265	87	15	x	x	PROPN
fis-1265	87	16	is	be	AUX
fis-1265	87	17	the	the	DET
fis-1265	87	18	linear	linear	ADJ
fis-1265	87	19	velocity	velocity	NOUN
fis-1265	87	20	of	of	ADP
fis-1265	87	21	the	the	DET
fis-1265	87	22	inertial	inertial	ADJ
fis-1265	87	23	masses	masse	NOUN
fis-1265	87	24	due	due	ADJ
fis-1265	87	25	to	to	ADP
fis-1265	87	26	resonant	resonant	VERB
fis-1265	87	27	driving	driving	NOUN
fis-1265	87	28	and	and	CCONJ
fis-1265	87	29	m	m	NOUN
fis-1265	87	30	is	be	AUX
fis-1265	87	31	their	their	PRON
fis-1265	87	32	mass	mass	NOUN
fis-1265	87	33	.	.	PUNCT
fis-1265	88	1	v.	v.	ADP
fis-1265	88	2	zega	zega	PROPN
fis-1265	88	3	et	et	PROPN
fis-1265	88	4	alii	alii	PROPN
fis-1265	88	5	,	,	PUNCT
fis-1265	88	6	frattura	frattura	PROPN
fis-1265	88	7	ed	ed	PROPN
fis-1265	88	8	integrità	integrità	PROPN
fis-1265	88	9	strutturale	strutturale	PROPN
fis-1265	88	10	,	,	PUNCT
fis-1265	88	11	29	29	NUM
fis-1265	88	12	(	(	PUNCT
fis-1265	88	13	2014	2014	NUM
fis-1265	88	14	)	)	PUNCT
fis-1265	88	15	334	334	NUM
fis-1265	88	16	-	-	SYM
fis-1265	88	17	342	342	NUM
fis-1265	88	18	;	;	PUNCT
fis-1265	88	19	doi	doi	NOUN
fis-1265	88	20	:	:	PUNCT
fis-1265	88	21	10.3221	10.3221	NUM
fis-1265	88	22	/	/	SYM
fis-1265	88	23	igf	igf	PROPN
fis-1265	88	24	-	-	PROPN
fis-1265	88	25	esis.29.29	esis.29.29	PROPN
fis-1265	88	26	338	338	NUM
fis-1265	88	27	consequently	consequently	ADV
fis-1265	88	28	,	,	PUNCT
fis-1265	88	29	the	the	DET
fis-1265	88	30	resonators	resonator	NOUN
fis-1265	88	31	,	,	PUNCT
fis-1265	88	32	are	be	AUX
fis-1265	88	33	subjected	subject	VERB
fis-1265	88	34	to	to	ADP
fis-1265	88	35	an	an	DET
fis-1265	88	36	axial	axial	ADJ
fis-1265	88	37	action	action	NOUN
fis-1265	88	38	:	:	PUNCT
fis-1265	88	39	in	in	ADP
fis-1265	88	40	particular	particular	ADJ
fis-1265	88	41	,	,	PUNCT
fis-1265	88	42	two	two	NUM
fis-1265	88	43	of	of	ADP
fis-1265	88	44	them	they	PRON
fis-1265	88	45	,	,	PUNCT
fis-1265	88	46	for	for	ADP
fis-1265	88	47	instance	instance	NOUN
fis-1265	88	48	resonators	resonator	NOUN
fis-1265	88	49	i	i	PRON
fis-1265	88	50	and	and	CCONJ
fis-1265	88	51	iv	iv	NUM
fis-1265	88	52	,	,	PUNCT
fis-1265	88	53	are	be	AUX
fis-1265	88	54	subjected	subject	VERB
fis-1265	88	55	to	to	ADP
fis-1265	88	56	a	a	DET
fis-1265	88	57	compressive	compressive	ADJ
fis-1265	88	58	force	force	NOUN
fis-1265	88	59	,	,	PUNCT
fis-1265	88	60	whereas	whereas	SCONJ
fis-1265	88	61	the	the	DET
fis-1265	88	62	other	other	ADJ
fis-1265	88	63	two	two	NUM
fis-1265	88	64	,	,	PUNCT
fis-1265	88	65	for	for	ADP
fis-1265	88	66	instance	instance	NOUN
fis-1265	88	67	ii	ii	PROPN
fis-1265	88	68	and	and	CCONJ
fis-1265	88	69	iii	iii	PROPN
fis-1265	88	70	,	,	PUNCT
fis-1265	88	71	are	be	AUX
fis-1265	88	72	subjected	subject	VERB
fis-1265	88	73	to	to	ADP
fis-1265	88	74	a	a	DET
fis-1265	88	75	tensile	tensile	NOUN
fis-1265	88	76	force	force	NOUN
fis-1265	88	77	of	of	ADP
fis-1265	88	78	the	the	DET
fis-1265	88	79	same	same	ADJ
fis-1265	88	80	intensity	intensity	NOUN
fis-1265	88	81	,	,	PUNCT
fis-1265	88	82	n	n	CCONJ
fis-1265	88	83	,	,	PUNCT
fis-1265	88	84	2	2	NUM
fis-1265	88	85	c	c	NOUN
fis-1265	88	86	ii	ii	PROPN
fis-1265	88	87	iii	iii	X
fis-1265	89	1	i	i	PRON
fis-1265	89	2	iv	iv	VERB
fis-1265	89	3	f	f	PROPN
fis-1265	89	4	n	n	CCONJ
fis-1265	89	5	n	n	CCONJ
fis-1265	89	6	n	n	CCONJ
fis-1265	89	7	n	n	PROPN
fis-1265	89	8			PROPN
fis-1265	89	9			PROPN
fis-1265	89	10			PROPN
fis-1265	89	11			PROPN
fis-1265	89	12			PROPN
fis-1265	89	13			NUM
fis-1265	89	14	(	(	PUNCT
fis-1265	89	15	7	7	NUM
fis-1265	89	16	)	)	PUNCT
fis-1265	89	17	where	where	SCONJ
fis-1265	89	18			PROPN
fis-1265	89	19	is	be	AUX
fis-1265	89	20	a	a	DET
fis-1265	89	21	force	force	NOUN
fis-1265	89	22	-	-	PUNCT
fis-1265	89	23	amplification	amplification	NOUN
fis-1265	89	24	factor	factor	NOUN
fis-1265	89	25	,	,	PUNCT
fis-1265	89	26	depending	depend	VERB
fis-1265	89	27	on	on	ADP
fis-1265	89	28	the	the	DET
fis-1265	89	29	geometry	geometry	NOUN
fis-1265	89	30	of	of	ADP
fis-1265	89	31	the	the	DET
fis-1265	89	32	resonator	resonator	NOUN
fis-1265	89	33	and	and	CCONJ
fis-1265	89	34	in	in	ADP
fis-1265	89	35	particular	particular	ADJ
fis-1265	89	36	on	on	ADP
fis-1265	89	37	h.	h.	PROPN
fis-1265	89	38	because	because	SCONJ
fis-1265	89	39	of	of	ADP
fis-1265	89	40	the	the	DET
fis-1265	89	41	axial	axial	ADJ
fis-1265	89	42	stress	stress	NOUN
fis-1265	89	43	,	,	PUNCT
fis-1265	89	44	the	the	DET
fis-1265	89	45	frequency	frequency	NOUN
fis-1265	89	46	of	of	ADP
fis-1265	89	47	oscillation	oscillation	NOUN
fis-1265	89	48	of	of	ADP
fis-1265	89	49	the	the	DET
fis-1265	89	50	resonators	resonator	NOUN
fis-1265	89	51	subjected	subject	VERB
fis-1265	89	52	to	to	PART
fis-1265	89	53	compression	compression	NOUN
fis-1265	89	54	decreases	decrease	NOUN
fis-1265	89	55	,	,	PUNCT
fis-1265	89	56	whereas	whereas	SCONJ
fis-1265	89	57	the	the	DET
fis-1265	89	58	frequency	frequency	NOUN
fis-1265	89	59	of	of	ADP
fis-1265	89	60	oscillation	oscillation	NOUN
fis-1265	89	61	of	of	ADP
fis-1265	89	62	the	the	DET
fis-1265	89	63	resonators	resonator	NOUN
fis-1265	89	64	subjected	subject	VERB
fis-1265	89	65	to	to	ADP
fis-1265	89	66	tension	tension	NOUN
fis-1265	89	67	increases	increase	NOUN
fis-1265	89	68	,	,	PUNCT
fis-1265	89	69	according	accord	VERB
fis-1265	89	70	to	to	ADP
fis-1265	89	71	the	the	DET
fis-1265	89	72	relation	relation	NOUN
fis-1265	89	73	(	(	PUNCT
fis-1265	89	74	4	4	NUM
fis-1265	89	75	)	)	PUNCT
fis-1265	89	76	.	.	PUNCT
fis-1265	90	1	figure	figure	VERB
fis-1265	90	2	3	3	NUM
fis-1265	90	3	:	:	PUNCT
fis-1265	90	4	schematic	schematic	ADJ
fis-1265	90	5	plan	plan	NOUN
fis-1265	90	6	view	view	NOUN
fis-1265	90	7	of	of	ADP
fis-1265	90	8	the	the	DET
fis-1265	90	9	structure	structure	NOUN
fis-1265	90	10	:	:	PUNCT
fis-1265	90	11	(	(	PUNCT
fis-1265	90	12	a	a	X
fis-1265	90	13	)	)	PUNCT
fis-1265	90	14	detection	detection	NOUN
fis-1265	90	15	of	of	ADP
fis-1265	90	16	the	the	DET
fis-1265	90	17	yaw	yaw	NOUN
fis-1265	90	18	angular	angular	ADJ
fis-1265	90	19	velocity	velocity	NOUN
fis-1265	90	20	ωz	ωz	ADP
fis-1265	90	21	,	,	PUNCT
fis-1265	90	22	(	(	PUNCT
fis-1265	90	23	b	b	X
fis-1265	90	24	)	)	PUNCT
fis-1265	90	25	detection	detection	NOUN
fis-1265	90	26	of	of	ADP
fis-1265	90	27	the	the	DET
fis-1265	90	28	linear	linear	ADJ
fis-1265	90	29	acceleration	acceleration	NOUN
fis-1265	90	30	ay	ay	INTJ
fis-1265	90	31	combining	combine	VERB
fis-1265	90	32	the	the	DET
fis-1265	90	33	readings	reading	NOUN
fis-1265	90	34	of	of	ADP
fis-1265	90	35	frequency	frequency	NOUN
fis-1265	90	36	of	of	ADP
fis-1265	90	37	the	the	DET
fis-1265	90	38	four	four	NUM
fis-1265	90	39	bending	bend	VERB
fis-1265	90	40	resonators	resonator	NOUN
fis-1265	90	41	from	from	ADP
fis-1265	90	42	equation	equation	NOUN
fis-1265	90	43	(	(	PUNCT
fis-1265	90	44	4	4	NUM
fis-1265	90	45	)	)	PUNCT
fis-1265	90	46	,	,	PUNCT
fis-1265	90	47	linearized	linearize	VERB
fis-1265	90	48	around	around	ADP
fis-1265	90	49	the	the	DET
fis-1265	90	50	nominal	nominal	ADJ
fis-1265	90	51	frequency	frequency	NOUN
fis-1265	90	52	f0	f0	PROPN
fis-1265	90	53	,	,	PUNCT
fis-1265	90	54	one	one	PRON
fis-1265	90	55	can	can	AUX
fis-1265	90	56	compute	compute	VERB
fis-1265	90	57	the	the	DET
fis-1265	90	58	external	external	ADJ
fis-1265	90	59	yaw	yaw	NOUN
fis-1265	90	60	angular	angular	ADJ
fis-1265	90	61	velocity	velocity	NOUN
fis-1265	90	62	ωz	ωz	ADP
fis-1265	90	63	0	0	NUM
fis-1265	90	64	0	0	NUM
fis-1265	90	65	1	1	NUM
fis-1265	90	66	4.88	4.88	NUM
fis-1265	90	67	1	1	NUM
fis-1265	90	68	4.88	4.88	NUM
fis-1265	90	69	2	2	NUM
fis-1265	90	70	1	1	NUM
fis-1265	90	71	1	1	NUM
fis-1265	90	72	2	2	NUM
fis-1265	90	73	(	(	PUNCT
fis-1265	90	74	)	)	PUNCT
fis-1265	90	75	2	2	NUM
fis-1265	90	76	(	(	PUNCT
fis-1265	90	77	)	)	PUNCT
fis-1265	90	78	4.88	4.88	NUM
fis-1265	90	79	2	2	NUM
fis-1265	90	80	(	(	PUNCT
fis-1265	90	81	)	)	PUNCT
fis-1265	91	1	iii	iii	X
fis-1265	91	2	ii	ii	NOUN
fis-1265	92	1	i	i	PRON
fis-1265	92	2	iv	iv	VERB
fis-1265	92	3	z	z	NOUN
fis-1265	92	4	z	z	NOUN
fis-1265	92	5	m	m	VERB
fis-1265	92	6	e	e	NOUN
fis-1265	92	7	m	m	NOUN
fis-1265	92	8	e	e	NOUN
fis-1265	92	9	z	z	NOUN
fis-1265	92	10	m	m	VERB
fis-1265	92	11	e	e	NOUN
fis-1265	92	12	f	f	X
fis-1265	93	1	f	f	PROPN
fis-1265	93	2	f	f	PROPN
fis-1265	94	1	f	f	PROPN
fis-1265	94	2	f	f	X
fis-1265	94	3	m	m	VERB
fis-1265	94	4	x	x	VERB
fis-1265	94	5	m	m	VERB
fis-1265	94	6	x	x	X
fis-1265	94	7	h	h	NOUN
fis-1265	95	1	k	k	PROPN
fis-1265	95	2	k	k	PROPN
fis-1265	96	1	h	h	NOUN
fis-1265	97	1	k	k	PROPN
fis-1265	97	2	k	k	PROPN
fis-1265	98	1	f	f	X
fis-1265	98	2	m	m	VERB
fis-1265	98	3	x	x	VERB
fis-1265	98	4	h	h	NOUN
fis-1265	98	5	k	k	PROPN
fis-1265	98	6	k	k	PROPN
fis-1265	98	7			NUM
fis-1265	98	8			NUM
fis-1265	98	9			NUM
fis-1265	98	10			NOUN
fis-1265	98	11			PROPN
fis-1265	98	12			VERB
fis-1265	98	13			PROPN
fis-1265	98	14			PROPN
fis-1265	98	15			X
fis-1265	98	16			PART
fis-1265	98	17			PROPN
fis-1265	98	18			PROPN
fis-1265	98	19			ADJ
fis-1265	98	20			PROPN
fis-1265	98	21			PART
fis-1265	98	22			NOUN
fis-1265	98	23			NOUN
fis-1265	98	24			NOUN
fis-1265	98	25			NUM
fis-1265	98	26			PROPN
fis-1265	98	27			NOUN
fis-1265	98	28			NOUN
fis-1265	98	29			NOUN
fis-1265	98	30			NOUN
fis-1265	98	31	(	(	PUNCT
fis-1265	98	32	8)	8)	NUM
fis-1265	98	33	on	on	ADP
fis-1265	98	34	the	the	DET
fis-1265	98	35	other	other	ADJ
fis-1265	98	36	hand	hand	NOUN
fis-1265	98	37	,	,	PUNCT
fis-1265	98	38	when	when	SCONJ
fis-1265	98	39	an	an	DET
fis-1265	98	40	external	external	ADJ
fis-1265	98	41	linear	linear	NOUN
fis-1265	98	42	acceleration	acceleration	NOUN
fis-1265	98	43	ay	ay	NOUN
fis-1265	98	44	is	be	AUX
fis-1265	98	45	applied	apply	VERB
fis-1265	98	46	,	,	PUNCT
fis-1265	98	47	as	as	SCONJ
fis-1265	98	48	shown	show	VERB
fis-1265	98	49	in	in	ADP
fis-1265	98	50	fig	fig	NOUN
fis-1265	98	51	.	.	PUNCT
fis-1265	99	1	3(b	3(b	NUM
fis-1265	99	2	)	)	PUNCT
fis-1265	99	3	,	,	PUNCT
fis-1265	99	4	the	the	DET
fis-1265	99	5	inertial	inertial	ADJ
fis-1265	99	6	masses	masse	NOUN
fis-1265	99	7	are	be	AUX
fis-1265	99	8	subjected	subject	VERB
fis-1265	99	9	to	to	ADP
fis-1265	99	10	inertia	inertia	NOUN
fis-1265	99	11	forces	force	NOUN
fis-1265	99	12	fa	fa	VERB
fis-1265	99	13	directed	direct	VERB
fis-1265	99	14	in	in	ADP
fis-1265	99	15	the	the	DET
fis-1265	99	16	y	y	PROPN
fis-1265	99	17	direction	direction	NOUN
fis-1265	99	18	,	,	PUNCT
fis-1265	99	19	with	with	ADP
fis-1265	99	20	the	the	DET
fis-1265	99	21	same	same	ADJ
fis-1265	99	22	sign	sign	NOUN
fis-1265	99	23	and	and	CCONJ
fis-1265	99	24	with	with	ADP
fis-1265	99	25	modulus	modulus	NOUN
fis-1265	99	26	a	a	DET
fis-1265	99	27	yf	yf	NOUN
fis-1265	99	28	ma	ma	NOUN
fis-1265	99	29	(	(	PUNCT
fis-1265	99	30	9	9	NUM
fis-1265	99	31	)	)	PUNCT
fis-1265	99	32	as	as	ADP
fis-1265	99	33	a	a	DET
fis-1265	99	34	result	result	NOUN
fis-1265	99	35	of	of	ADP
fis-1265	99	36	the	the	DET
fis-1265	99	37	inertia	inertia	NOUN
fis-1265	99	38	forces	force	NOUN
fis-1265	99	39	fa	fa	PROPN
fis-1265	99	40	,	,	PUNCT
fis-1265	99	41	the	the	DET
fis-1265	99	42	bending	bend	VERB
fis-1265	99	43	resonators	resonator	NOUN
fis-1265	99	44	are	be	AUX
fis-1265	99	45	again	again	ADV
fis-1265	99	46	subjected	subject	VERB
fis-1265	99	47	to	to	ADP
fis-1265	99	48	axial	axial	ADJ
fis-1265	99	49	stresses	stress	NOUN
fis-1265	99	50	,	,	PUNCT
fis-1265	99	51	but	but	CCONJ
fis-1265	99	52	in	in	ADP
fis-1265	99	53	this	this	DET
fis-1265	99	54	case	case	NOUN
fis-1265	99	55	,	,	PUNCT
fis-1265	99	56	these	these	DET
fis-1265	99	57	axial	axial	ADJ
fis-1265	99	58	stresses	stress	NOUN
fis-1265	99	59	are	be	AUX
fis-1265	99	60	of	of	ADP
fis-1265	99	61	the	the	DET
fis-1265	99	62	same	same	ADJ
fis-1265	99	63	sign	sign	NOUN
fis-1265	99	64	in	in	ADP
fis-1265	99	65	the	the	DET
fis-1265	99	66	resonators	resonator	NOUN
fis-1265	99	67	i	i	PRON
fis-1265	99	68	and	and	CCONJ
fis-1265	99	69	iii	iii	NOUN
fis-1265	99	70	,	,	PUNCT
fis-1265	99	71	and	and	CCONJ
fis-1265	99	72	they	they	PRON
fis-1265	99	73	are	be	AUX
fis-1265	99	74	of	of	ADP
fis-1265	99	75	the	the	DET
fis-1265	99	76	same	same	ADJ
fis-1265	99	77	sign	sign	NOUN
fis-1265	99	78	in	in	ADP
fis-1265	99	79	the	the	DET
fis-1265	99	80	resonators	resonator	NOUN
fis-1265	99	81	ii	ii	PROPN
fis-1265	99	82	and	and	CCONJ
fis-1265	99	83	iv	iv	NUM
fis-1265	99	84	.	.	PROPN
fis-1265	99	85	2	2	NUM
fis-1265	99	86	a	a	DET
fis-1265	99	87	ii	ii	NOUN
fis-1265	99	88	iii	iii	X
fis-1265	100	1	i	i	PRON
fis-1265	100	2	iv	iv	VERB
fis-1265	100	3	f	f	PROPN
fis-1265	100	4	n	n	CCONJ
fis-1265	100	5	n	n	CCONJ
fis-1265	100	6	n	n	CCONJ
fis-1265	100	7	n	n	PROPN
fis-1265	100	8			NOUN
fis-1265	100	9			NOUN
fis-1265	100	10			NUM
fis-1265	100	11			PROPN
fis-1265	100	12			NOUN
fis-1265	100	13			NUM
fis-1265	100	14	(	(	PUNCT
fis-1265	100	15	10	10	NUM
fis-1265	100	16	)	)	PUNCT
fis-1265	100	17	combining	combine	VERB
fis-1265	100	18	the	the	DET
fis-1265	100	19	readings	reading	NOUN
fis-1265	100	20	of	of	ADP
fis-1265	100	21	the	the	DET
fis-1265	100	22	four	four	NUM
fis-1265	100	23	resonators	resonator	NOUN
fis-1265	100	24	starting	start	VERB
fis-1265	100	25	once	once	ADV
fis-1265	100	26	again	again	ADV
fis-1265	100	27	from	from	ADP
fis-1265	100	28	equation	equation	NOUN
fis-1265	100	29	(	(	PUNCT
fis-1265	100	30	4	4	X
fis-1265	100	31	)	)	PUNCT
fis-1265	100	32	linearized	linearize	VERB
fis-1265	100	33	around	around	ADP
fis-1265	100	34	the	the	DET
fis-1265	100	35	nominal	nominal	ADJ
fis-1265	100	36	flexural	flexural	ADJ
fis-1265	100	37	oscillation	oscillation	NOUN
fis-1265	100	38	frequency	frequency	NOUN
fis-1265	100	39	f0	f0	PROPN
fis-1265	100	40	,	,	PUNCT
fis-1265	100	41	one	one	NOUN
fis-1265	100	42	obtains	obtain	VERB
fis-1265	100	43	a	a	DET
fis-1265	100	44	measure	measure	NOUN
fis-1265	100	45	of	of	ADP
fis-1265	100	46	the	the	DET
fis-1265	100	47	external	external	ADJ
fis-1265	100	48	acceleration	acceleration	NOUN
fis-1265	100	49	ay	ay	NOUN
fis-1265	100	50	:	:	PUNCT
fis-1265	100	51	0	0	NUM
fis-1265	100	52	0	0	NUM
fis-1265	100	53	1	1	NUM
fis-1265	100	54	4.88	4.88	NUM
fis-1265	100	55	1	1	NUM
fis-1265	100	56	4.88	4.88	NUM
fis-1265	100	57	4.88	4.88	NUM
fis-1265	100	58	2	2	NUM
fis-1265	100	59	1	1	NUM
fis-1265	100	60	1	1	NUM
fis-1265	100	61	4	4	NUM
fis-1265	100	62	(	(	PUNCT
fis-1265	100	63	)	)	PUNCT
fis-1265	100	64	4	4	NUM
fis-1265	100	65	(	(	PUNCT
fis-1265	100	66	)	)	PUNCT
fis-1265	100	67	(	(	PUNCT
fis-1265	100	68	)	)	PUNCT
fis-1265	101	1	i	i	PRON
fis-1265	101	2	iii	iii	X
fis-1265	101	3	ii	ii	VERB
fis-1265	101	4	iv	iv	NUM
fis-1265	101	5	y	y	PROPN
fis-1265	101	6	y	y	PROPN
fis-1265	101	7	y	y	PROPN
fis-1265	101	8	m	m	VERB
fis-1265	101	9	e	e	NOUN
fis-1265	101	10	m	m	NOUN
fis-1265	101	11	e	e	X
fis-1265	101	12	m	m	NOUN
fis-1265	101	13	e	e	NOUN
fis-1265	101	14	f	f	PROPN
fis-1265	102	1	f	f	PROPN
fis-1265	102	2	f	f	PROPN
fis-1265	103	1	f	f	PROPN
fis-1265	103	2	f	f	PROPN
fis-1265	103	3	m	m	VERB
fis-1265	103	4	a	a	DET
fis-1265	103	5	m	m	NOUN
fis-1265	103	6	a	a	DET
fis-1265	103	7	f	f	NOUN
fis-1265	103	8	m	m	VERB
fis-1265	103	9	a	a	DET
fis-1265	103	10	h	h	NOUN
fis-1265	104	1	k	k	PROPN
fis-1265	104	2	k	k	PROPN
fis-1265	104	3	h	h	NOUN
fis-1265	105	1	k	k	PROPN
fis-1265	105	2	k	k	PROPN
fis-1265	106	1	h	h	PROPN
fis-1265	106	2	k	k	PROPN
fis-1265	106	3	k	k	PROPN
fis-1265	106	4			NUM
fis-1265	106	5			NUM
fis-1265	106	6			NUM
fis-1265	106	7			NOUN
fis-1265	106	8			PROPN
fis-1265	106	9			VERB
fis-1265	106	10			PROPN
fis-1265	106	11			PROPN
fis-1265	106	12			PUNCT
fis-1265	106	13			X
fis-1265	106	14			PROPN
fis-1265	106	15			PRON
fis-1265	106	16			PUNCT
fis-1265	106	17			X
fis-1265	106	18			PROPN
fis-1265	106	19			NOUN
fis-1265	106	20			NOUN
fis-1265	106	21	(	(	PUNCT
fis-1265	106	22	11	11	NUM
fis-1265	106	23	)	)	PUNCT
fis-1265	106	24	therefore	therefore	ADV
fis-1265	106	25	,	,	PUNCT
fis-1265	106	26	via	via	ADP
fis-1265	106	27	a	a	DET
fis-1265	106	28	different	different	ADJ
fis-1265	106	29	combination	combination	NOUN
fis-1265	106	30	of	of	ADP
fis-1265	106	31	the	the	DET
fis-1265	106	32	quantities	quantity	NOUN
fis-1265	106	33	supplied	supply	VERB
fis-1265	106	34	by	by	ADP
fis-1265	106	35	the	the	DET
fis-1265	106	36	same	same	ADJ
fis-1265	106	37	resonator	resonator	NOUN
fis-1265	106	38	elements	element	NOUN
fis-1265	106	39	it	it	PRON
fis-1265	106	40	is	be	AUX
fis-1265	106	41	possible	possible	ADJ
fis-1265	106	42	to	to	PART
fis-1265	106	43	detect	detect	VERB
fis-1265	106	44	simultaneously	simultaneously	ADV
fis-1265	106	45	the	the	DET
fis-1265	106	46	yaw	yaw	NOUN
fis-1265	106	47	angular	angular	ADJ
fis-1265	106	48	velocity	velocity	NOUN
fis-1265	106	49	ωz	ωz	ADV
fis-1265	106	50	and	and	CCONJ
fis-1265	106	51	the	the	DET
fis-1265	106	52	linear	linear	ADJ
fis-1265	106	53	in	in	ADP
fis-1265	106	54	-	-	PUNCT
fis-1265	106	55	plane	plane	NOUN
fis-1265	106	56	acceleration	acceleration	NOUN
fis-1265	106	57	ay	ay	NOUN
fis-1265	106	58	;	;	PUNCT
fis-1265	106	59	both	both	DET
fis-1265	106	60	measures	measure	NOUN
fis-1265	106	61	are	be	AUX
fis-1265	106	62	of	of	ADP
fis-1265	106	63	differential	differential	ADJ
fis-1265	106	64	type	type	NOUN
fis-1265	106	65	.	.	PUNCT
fis-1265	107	1	the	the	DET
fis-1265	107	2	measure	measure	NOUN
fis-1265	107	3	of	of	ADP
fis-1265	107	4	the	the	DET
fis-1265	107	5	roll	roll	NOUN
fis-1265	107	6	angular	angular	ADJ
fis-1265	107	7	velocity	velocity	NOUN
fis-1265	107	8	ωy	ωy	PROPN
fis-1265	107	9	and	and	CCONJ
fis-1265	107	10	of	of	ADP
fis-1265	107	11	the	the	DET
fis-1265	107	12	linear	linear	ADJ
fis-1265	107	13	out	out	ADP
fis-1265	107	14	-	-	PUNCT
fis-1265	107	15	of	of	ADP
fis-1265	107	16	-	-	PUNCT
fis-1265	107	17	plane	plane	NOUN
fis-1265	107	18	acceleration	acceleration	NOUN
fis-1265	107	19	az	az	PROPN
fis-1265	107	20	is	be	AUX
fis-1265	107	21	performed	perform	VERB
fis-1265	107	22	by	by	ADP
fis-1265	107	23	means	mean	NOUN
fis-1265	107	24	of	of	ADP
fis-1265	107	25	the	the	DET
fis-1265	107	26	torsional	torsional	ADJ
fis-1265	107	27	elements	element	NOUN
fis-1265	107	28	labeled	label	VERB
fis-1265	107	29	1	1	NUM
fis-1265	107	30	,	,	PUNCT
fis-1265	107	31	2	2	NUM
fis-1265	107	32	,	,	PUNCT
fis-1265	107	33	3	3	NUM
fis-1265	107	34	,	,	PUNCT
fis-1265	107	35	4	4	NUM
fis-1265	107	36	in	in	ADP
fis-1265	107	37	fig	fig	NOUN
fis-1265	107	38	.	.	PUNCT
fis-1265	108	1	4	4	NUM
fis-1265	108	2	,	,	PUNCT
fis-1265	108	3	kept	keep	VERB
fis-1265	108	4	in	in	ADP
fis-1265	108	5	resonance	resonance	NOUN
fis-1265	108	6	according	accord	VERB
fis-1265	108	7	to	to	ADP
fis-1265	108	8	their	their	PRON
fis-1265	108	9	torsional	torsional	ADJ
fis-1265	108	10	natural	natural	ADJ
fis-1265	108	11	mode	mode	NOUN
fis-1265	108	12	through	through	ADP
fis-1265	108	13	the	the	DET
fis-1265	108	14	driving	drive	VERB
fis-1265	108	15	electrode	electrode	NOUN
fis-1265	108	16	located	locate	VERB
fis-1265	108	17	below	below	ADP
fis-1265	108	18	them	they	PRON
fis-1265	108	19	on	on	ADP
fis-1265	108	20	the	the	DET
fis-1265	108	21	substrate	substrate	NOUN
fis-1265	108	22	.	.	PUNCT
fis-1265	109	1	when	when	SCONJ
fis-1265	109	2	an	an	DET
fis-1265	109	3	external	external	ADJ
fis-1265	109	4	roll	roll	NOUN
fis-1265	109	5	angular	angular	ADJ
fis-1265	109	6	velocity	velocity	NOUN
fis-1265	109	7	ωy	ωy	PROPN
fis-1265	109	8	is	be	AUX
fis-1265	109	9	applied	apply	VERB
fis-1265	109	10	,	,	PUNCT
fis-1265	109	11	two	two	NUM
fis-1265	109	12	coriolis	corioli	NOUN
fis-1265	109	13	’	'	PUNCT
fis-1265	109	14	forces	force	NOUN
fis-1265	109	15	,	,	PUNCT
fis-1265	109	16	labeled	label	VERB
fis-1265	109	17	fc	fc	PROPN
fis-1265	109	18	in	in	ADP
fis-1265	109	19	fig	fig	NOUN
fis-1265	109	20	.	.	PUNCT
fis-1265	110	1	4(a	4(a	NUM
fis-1265	110	2	)	)	PUNCT
fis-1265	111	1	,	,	PUNCT
fis-1265	111	2	originate	originate	VERB
fis-1265	111	3	on	on	ADP
fis-1265	111	4	the	the	DET
fis-1265	111	5	inertial	inertial	ADJ
fis-1265	111	6	masses	masse	NOUN
fis-1265	111	7	which	which	PRON
fis-1265	111	8	are	be	AUX
fis-1265	111	9	oscillating	oscillate	VERB
fis-1265	111	10	in	in	ADP
fis-1265	111	11	the	the	DET
fis-1265	111	12	x	x	NOUN
fis-1265	111	13	-	-	NOUN
fis-1265	111	14	direction	direction	NOUN
fis-1265	111	15	.	.	PUNCT
fis-1265	112	1	these	these	DET
fis-1265	112	2	forces	force	NOUN
fis-1265	112	3	are	be	AUX
fis-1265	112	4	directed	direct	VERB
fis-1265	112	5	along	along	ADP
fis-1265	112	6	the	the	DET
fis-1265	112	7	out	out	ADJ
fis-1265	112	8	-	-	PUNCT
fis-1265	112	9	of	of	ADP
fis-1265	112	10	-	-	PUNCT
fis-1265	112	11	plane	plane	NOUN
fis-1265	112	12	axis	axis	NOUN
fis-1265	112	13	z	z	PROPN
fis-1265	112	14	,	,	PUNCT
fis-1265	112	15	have	have	VERB
fis-1265	112	16	opposite	opposite	ADJ
fis-1265	112	17	signs	sign	NOUN
fis-1265	112	18	and	and	CCONJ
fis-1265	112	19	the	the	DET
fis-1265	112	20	modulus	modulus	NOUN
fis-1265	112	21	is	be	AUX
fis-1265	112	22	given	give	VERB
fis-1265	112	23	by	by	ADP
fis-1265	112	24	v.	v.	ADP
fis-1265	112	25	zega	zega	PROPN
fis-1265	112	26	et	et	PROPN
fis-1265	112	27	alii	alii	PROPN
fis-1265	112	28	,	,	PUNCT
fis-1265	112	29	frattura	frattura	PROPN
fis-1265	112	30	ed	ed	PROPN
fis-1265	112	31	integrità	integrità	PROPN
fis-1265	112	32	strutturale	strutturale	PROPN
fis-1265	112	33	,	,	PUNCT
fis-1265	112	34	29	29	NUM
fis-1265	112	35	(	(	PUNCT
fis-1265	112	36	2014	2014	NUM
fis-1265	112	37	)	)	PUNCT
fis-1265	112	38	334	334	NUM
fis-1265	112	39	-	-	SYM
fis-1265	112	40	342	342	NUM
fis-1265	112	41	;	;	PUNCT
fis-1265	112	42	doi	doi	NOUN
fis-1265	112	43	:	:	PUNCT
fis-1265	112	44	10.3221	10.3221	NUM
fis-1265	112	45	/	/	SYM
fis-1265	112	46	igf	igf	PROPN
fis-1265	112	47	-	-	PUNCT
fis-1265	112	48	esis.29.29	esis.29.29	PROPN
fis-1265	112	49	339	339	NUM
fis-1265	112	50	xmf	xmf	NOUN
fis-1265	113	1	yc	yc	ADP
fis-1265	113	2	ω2	ω2	PROPN
fis-1265	113	3	(	(	PUNCT
fis-1265	113	4	12	12	NUM
fis-1265	113	5	)	)	PUNCT
fis-1265	113	6	as	as	ADP
fis-1265	113	7	a	a	DET
fis-1265	113	8	result	result	NOUN
fis-1265	113	9	,	,	PUNCT
fis-1265	113	10	the	the	DET
fis-1265	113	11	two	two	NUM
fis-1265	113	12	inertial	inertial	ADJ
fis-1265	113	13	masses	masse	NOUN
fis-1265	113	14	rotate	rotate	VERB
fis-1265	113	15	about	about	ADP
fis-1265	113	16	their	their	PRON
fis-1265	113	17	respective	respective	ADJ
fis-1265	113	18	axis	axis	NOUN
fis-1265	113	19	of	of	ADP
fis-1265	113	20	rotation	rotation	NOUN
fis-1265	113	21	a	a	NOUN
fis-1265	113	22	-	-	PUNCT
fis-1265	113	23	a	a	NOUN
fis-1265	113	24	in	in	ADP
fis-1265	113	25	the	the	DET
fis-1265	113	26	same	same	ADJ
fis-1265	113	27	direction	direction	NOUN
fis-1265	113	28	(	(	PUNCT
fis-1265	113	29	see	see	VERB
fis-1265	113	30	fig	fig	NOUN
fis-1265	113	31	.	.	PUNCT
fis-1265	114	1	4(a	4(a	NUM
fis-1265	114	2	)	)	PUNCT
fis-1265	114	3	)	)	PUNCT
fis-1265	114	4	of	of	ADP
fis-1265	114	5	the	the	DET
fis-1265	114	6	angle	angle	NOUN
fis-1265	114	7	:	:	PUNCT
fis-1265	114	8	ω	ω	NOUN
fis-1265	114	9	3	3	NUM
fis-1265	114	10	3	3	NUM
fis-1265	114	11	l	l	NOUN
fis-1265	114	12	tsg	tsg	NOUN
fis-1265	114	13	rxm	rxm	NOUN
fis-1265	114	14	β	β	X
fis-1265	114	15	gy	gy	NOUN
fis-1265	114	16			PROPN
fis-1265	114	17	(	(	PUNCT
fis-1265	114	18	13	13	NUM
fis-1265	114	19	)	)	PUNCT
fis-1265	114	20	where	where	SCONJ
fis-1265	114	21	rg	rg	PROPN
fis-1265	114	22	is	be	AUX
fis-1265	114	23	the	the	DET
fis-1265	114	24	distance	distance	NOUN
fis-1265	114	25	between	between	ADP
fis-1265	114	26	the	the	DET
fis-1265	114	27	a	a	NOUN
fis-1265	114	28	-	-	PUNCT
fis-1265	114	29	a	a	DET
fis-1265	114	30	axis	axis	NOUN
fis-1265	114	31	of	of	ADP
fis-1265	114	32	rotation	rotation	NOUN
fis-1265	114	33	of	of	ADP
fis-1265	114	34	a	a	DET
fis-1265	114	35	proof	proof	ADJ
fis-1265	114	36	mass	mass	NOUN
fis-1265	114	37	and	and	CCONJ
fis-1265	114	38	the	the	DET
fis-1265	114	39	center	center	NOUN
fis-1265	114	40	of	of	ADP
fis-1265	114	41	gravity	gravity	NOUN
fis-1265	114	42	of	of	ADP
fis-1265	114	43	the	the	DET
fis-1265	114	44	same	same	ADJ
fis-1265	114	45	mass	mass	NOUN
fis-1265	114	46	,	,	PUNCT
fis-1265	114	47	is	be	AUX
fis-1265	114	48	the	the	DET
fis-1265	114	49	total	total	ADJ
fis-1265	114	50	length	length	NOUN
fis-1265	114	51	of	of	ADP
fis-1265	114	52	one	one	NUM
fis-1265	114	53	folded	fold	VERB
fis-1265	114	54	torsional	torsional	ADJ
fis-1265	114	55	spring	spring	NOUN
fis-1265	114	56	attaching	attach	VERB
fis-1265	114	57	the	the	DET
fis-1265	114	58	mass	mass	NOUN
fis-1265	114	59	to	to	ADP
fis-1265	114	60	the	the	DET
fis-1265	114	61	substrate	substrate	NOUN
fis-1265	114	62	and	and	CCONJ
fis-1265	114	63	t	t	X
fis-1265	114	64	its	its	PRON
fis-1265	114	65	in	in	ADP
fis-1265	114	66	-	-	PUNCT
fis-1265	114	67	plane	plane	NOUN
fis-1265	114	68	thickness	thickness	NOUN
fis-1265	114	69	.	.	PUNCT
fis-1265	115	1	figure	figure	VERB
fis-1265	115	2	4	4	NUM
fis-1265	115	3	:	:	PUNCT
fis-1265	115	4	schematic	schematic	ADJ
fis-1265	115	5	plan	plan	NOUN
fis-1265	115	6	view	view	NOUN
fis-1265	115	7	of	of	ADP
fis-1265	115	8	the	the	DET
fis-1265	115	9	structure	structure	NOUN
fis-1265	115	10	:	:	PUNCT
fis-1265	115	11	(	(	PUNCT
fis-1265	115	12	a	a	X
fis-1265	115	13	)	)	PUNCT
fis-1265	115	14	detection	detection	NOUN
fis-1265	115	15	of	of	ADP
fis-1265	115	16	the	the	DET
fis-1265	115	17	roll	roll	NOUN
fis-1265	115	18	angular	angular	ADJ
fis-1265	115	19	velocity	velocity	NOUN
fis-1265	115	20	ωy	ωy	PROPN
fis-1265	115	21	,	,	PUNCT
fis-1265	115	22	(	(	PUNCT
fis-1265	115	23	b	b	X
fis-1265	115	24	)	)	PUNCT
fis-1265	115	25	detection	detection	NOUN
fis-1265	115	26	of	of	ADP
fis-1265	115	27	the	the	DET
fis-1265	115	28	linear	linear	PROPN
fis-1265	115	29	acceleration	acceleration	PROPN
fis-1265	115	30	az	az	PROPN
fis-1265	115	31	in	in	ADP
fis-1265	115	32	particular	particular	ADJ
fis-1265	115	33	,	,	PUNCT
fis-1265	115	34	a	a	DET
fis-1265	115	35	first	first	ADJ
fis-1265	115	36	resonator	resonator	NOUN
fis-1265	115	37	element	element	NOUN
fis-1265	115	38	approach	approach	VERB
fis-1265	115	39	the	the	DET
fis-1265	115	40	substrate	substrate	NOUN
fis-1265	115	41	and	and	CCONJ
fis-1265	115	42	its	its	PRON
fis-1265	115	43	gap	gap	NOUN
fis-1265	115	44	reduces	reduce	VERB
fis-1265	115	45	to	to	ADP
fis-1265	115	46	0	0	NUM
fis-1265	115	47	g	g	NOUN
fis-1265	115	48	r	r	NOUN
fis-1265	115	49	while	while	SCONJ
fis-1265	115	50	the	the	DET
fis-1265	115	51	other	other	ADJ
fis-1265	115	52	resonator	resonator	NOUN
fis-1265	115	53	element	element	NOUN
fis-1265	115	54	move	move	VERB
fis-1265	115	55	away	away	ADV
fis-1265	115	56	from	from	ADP
fis-1265	115	57	the	the	DET
fis-1265	115	58	same	same	ADJ
fis-1265	115	59	substrate	substrate	NOUN
fis-1265	115	60	and	and	CCONJ
fis-1265	115	61	its	its	PRON
fis-1265	115	62	gap	gap	NOUN
fis-1265	115	63	increases	increase	VERB
fis-1265	115	64	to	to	ADP
fis-1265	115	65	0	0	NUM
fis-1265	115	66	g	g	NOUN
fis-1265	115	67	r	r	NOUN
fis-1265	115	68	,	,	PUNCT
fis-1265	115	69	r	r	NOUN
fis-1265	115	70	being	be	AUX
fis-1265	115	71	the	the	DET
fis-1265	115	72	distance	distance	NOUN
fis-1265	115	73	between	between	ADP
fis-1265	115	74	the	the	DET
fis-1265	115	75	a	a	NOUN
fis-1265	115	76	-	-	PUNCT
fis-1265	115	77	a	a	DET
fis-1265	115	78	axis	axis	NOUN
fis-1265	115	79	and	and	CCONJ
fis-1265	115	80	the	the	DET
fis-1265	115	81	torsional	torsional	ADJ
fis-1265	115	82	resonator	resonator	NOUN
fis-1265	115	83	’s	’s	PART
fis-1265	115	84	axis	axis	NOUN
fis-1265	115	85	of	of	ADP
fis-1265	115	86	rotation	rotation	NOUN
fis-1265	115	87	.	.	PUNCT
fis-1265	116	1	the	the	DET
fis-1265	116	2	torsional	torsional	ADJ
fis-1265	116	3	resonators	resonator	NOUN
fis-1265	116	4	change	change	VERB
fis-1265	116	5	their	their	PRON
fis-1265	116	6	natural	natural	ADJ
fis-1265	116	7	frequencies	frequency	NOUN
fis-1265	116	8	according	accord	VERB
fis-1265	116	9	to	to	ADP
fis-1265	116	10	(	(	PUNCT
fis-1265	116	11	5	5	NUM
fis-1265	116	12	)	)	PUNCT
fis-1265	116	13	as	as	ADP
fis-1265	116	14	a	a	DET
fis-1265	116	15	consequence	consequence	NOUN
fis-1265	116	16	of	of	ADP
fis-1265	116	17	their	their	PRON
fis-1265	116	18	electrostatic	electrostatic	ADJ
fis-1265	116	19	stiffness	stiffness	NOUN
fis-1265	116	20	variation	variation	NOUN
fis-1265	116	21			NOUN
fis-1265	116	22	2	2	NOUN
fis-1265	116	23	3	3	NUM
fis-1265	116	24	30	30	NUM
fis-1265	116	25	3	3	NUM
fis-1265	116	26	1	1	NUM
fis-1265	116	27	3	3	NUM
fis-1265	116	28	2	2	NUM
fis-1265	116	29	3	3	NUM
fis-1265	116	30	(	(	PUNCT
fis-1265	116	31	)	)	PUNCT
fis-1265	116	32	1	1	NUM
fis-1265	116	33	2	2	NUM
fis-1265	116	34	m	m	NOUN
fis-1265	116	35	p	p	NOUN
fis-1265	116	36	mass	mass	NOUN
fis-1265	117	1	l	l	PROPN
fis-1265	118	1	k	k	PROPN
fis-1265	119	1	v	v	X
fis-1265	119	2	b	b	X
fis-1265	119	3	c	c	NOUN
fis-1265	119	4	g	g	PROPN
fis-1265	119	5	r	r	PROPN
fis-1265	119	6	j	j	PROPN
fis-1265	119	7			PROPN
fis-1265	119	8			VERB
fis-1265	119	9			PROPN
fis-1265	119	10			PROPN
fis-1265	119	11			ADP
fis-1265	119	12			PROPN
fis-1265	119	13			PROPN
fis-1265	119	14			PROPN
fis-1265	119	15			PRON
fis-1265	119	16			NOUN
fis-1265	119	17	,	,	PUNCT
fis-1265	119	18			NOUN
fis-1265	119	19	2	2	ADJ
fis-1265	119	20	3	3	NUM
fis-1265	119	21	30	30	NUM
fis-1265	119	22	3	3	NUM
fis-1265	119	23	2	2	NUM
fis-1265	119	24	4	4	NUM
fis-1265	119	25	2	2	NUM
fis-1265	119	26	3	3	NUM
fis-1265	119	27	(	(	PUNCT
fis-1265	119	28	)	)	PUNCT
fis-1265	119	29	1	1	NUM
fis-1265	119	30	2	2	NUM
fis-1265	119	31	m	m	NOUN
fis-1265	119	32	p	p	NOUN
fis-1265	119	33	mass	mass	NOUN
fis-1265	120	1	l	l	PROPN
fis-1265	120	2	k	k	PROPN
fis-1265	120	3	v	v	X
fis-1265	120	4	b	b	X
fis-1265	120	5	c	c	NOUN
fis-1265	120	6	g	g	PROPN
fis-1265	120	7	r	r	PROPN
fis-1265	120	8	j	j	PROPN
fis-1265	120	9			PROPN
fis-1265	120	10			VERB
fis-1265	120	11			PROPN
fis-1265	120	12			PROPN
fis-1265	120	13			ADP
fis-1265	120	14			PROPN
fis-1265	120	15			PROPN
fis-1265	120	16			VERB
fis-1265	120	17			PROPN
fis-1265	121	1			PROPN
fis-1265	122	1	(	(	PUNCT
fis-1265	122	2	14	14	NUM
fis-1265	122	3	)	)	PUNCT
fis-1265	122	4	by	by	ADP
fis-1265	122	5	combining	combine	VERB
fis-1265	122	6	the	the	DET
fis-1265	122	7	readings	reading	NOUN
fis-1265	122	8	of	of	ADP
fis-1265	122	9	the	the	DET
fis-1265	122	10	four	four	NUM
fis-1265	122	11	torsional	torsional	ADJ
fis-1265	122	12	resonators	resonator	NOUN
fis-1265	122	13	and	and	CCONJ
fis-1265	122	14	linearizing	linearize	VERB
fis-1265	122	15	one	one	NUM
fis-1265	122	16	obtains	obtain	VERB
fis-1265	122	17	the	the	DET
fis-1265	122	18	frequency	frequency	NOUN
fis-1265	122	19	shift	shift	NOUN
fis-1265	122	20	which	which	PRON
fis-1265	122	21	provides	provide	VERB
fis-1265	122	22	a	a	DET
fis-1265	122	23	differential	differential	ADJ
fis-1265	122	24	measure	measure	NOUN
fis-1265	122	25	of	of	ADP
fis-1265	122	26	the	the	DET
fis-1265	122	27	roll	roll	NOUN
fis-1265	122	28	angular	angular	ADJ
fis-1265	122	29	velocity	velocity	NOUN
fis-1265	122	30	ωy	ωy	PROPN
fis-1265	122	31	:	:	PUNCT
fis-1265	122	32	2	2	NUM
fis-1265	122	33	1	1	NUM
fis-1265	122	34	4	4	NUM
fis-1265	122	35	3	3	NUM
fis-1265	122	36	0	0	NUM
fis-1265	122	37	0	0	NUM
fis-1265	122	38	3	3	NUM
fis-1265	122	39	0	0	NUM
fis-1265	122	40	0	0	NUM
fis-1265	122	41	6	6	NUM
fis-1265	122	42	18	18	NUM
fis-1265	122	43	ge	ge	PROPN
fis-1265	122	44	e	e	PROPN
fis-1265	122	45	y	y	PROPN
fis-1265	122	46	m	m	PROPN
fis-1265	122	47	e	e	NOUN
fis-1265	122	48	m	m	NOUN
fis-1265	122	49	e	e	NOUN
fis-1265	122	50	m	m	NOUN
fis-1265	122	51	x	x	VERB
fis-1265	122	52	rk	rk	NOUN
fis-1265	122	53	kr	kr	PROPN
fis-1265	122	54	r	r	NOUN
fis-1265	122	55	l	l	NOUN
fis-1265	123	1	k	k	NOUN
fis-1265	124	1	k	k	PROPN
fis-1265	124	2	g	g	PROPN
fis-1265	125	1	k	k	PROPN
fis-1265	125	2	k	k	PROPN
fis-1265	126	1	g	g	PROPN
fis-1265	126	2	g	g	PROPN
fis-1265	126	3	s	s	PROPN
fis-1265	126	4	t	t	NOUN
fis-1265	126	5			ADJ
fis-1265	126	6			PROPN
fis-1265	126	7			ADJ
fis-1265	126	8			PROPN
fis-1265	126	9			PROPN
fis-1265	126	10			PROPN
fis-1265	126	11			NOUN
fis-1265	126	12			VERB
fis-1265	126	13			PROPN
fis-1265	126	14			X
fis-1265	126	15			PROPN
fis-1265	126	16			PROPN
fis-1265	126	17			PROPN
fis-1265	126	18			NOUN
fis-1265	126	19			NOUN
fis-1265	126	20	(	(	PUNCT
fis-1265	126	21	15	15	NUM
fis-1265	126	22	)	)	PUNCT
fis-1265	126	23	in	in	ADP
fis-1265	126	24	the	the	DET
fis-1265	126	25	presence	presence	NOUN
fis-1265	126	26	of	of	ADP
fis-1265	126	27	linear	linear	ADJ
fis-1265	126	28	out	out	ADP
fis-1265	126	29	-	-	PUNCT
fis-1265	126	30	of	of	ADP
fis-1265	126	31	-	-	PUNCT
fis-1265	126	32	plane	plane	NOUN
fis-1265	126	33	acceleration	acceleration	NOUN
fis-1265	126	34	az	az	PROPN
fis-1265	126	35	,	,	PUNCT
fis-1265	126	36	(	(	PUNCT
fis-1265	126	37	see	see	VERB
fis-1265	126	38	fig	fig	NOUN
fis-1265	126	39	.	.	PUNCT
fis-1265	127	1	4(b	4(b	NUM
fis-1265	127	2	)	)	PUNCT
fis-1265	127	3	)	)	PUNCT
fis-1265	127	4	,	,	PUNCT
fis-1265	127	5	two	two	NUM
fis-1265	127	6	forces	force	NOUN
fis-1265	127	7	of	of	ADP
fis-1265	127	8	inertia	inertia	NOUN
fis-1265	127	9	fa	fa	PUNCT
fis-1265	127	10	originate	originate	VERB
fis-1265	127	11	on	on	ADP
fis-1265	127	12	the	the	DET
fis-1265	127	13	two	two	NUM
fis-1265	127	14	inertial	inertial	ADJ
fis-1265	127	15	masses	masse	NOUN
fis-1265	127	16	directed	direct	VERB
fis-1265	127	17	along	along	ADP
fis-1265	127	18	the	the	DET
fis-1265	127	19	axis	axis	NOUN
fis-1265	127	20	z	z	PROPN
fis-1265	127	21	,	,	PUNCT
fis-1265	127	22	which	which	PRON
fis-1265	127	23	have	have	VERB
fis-1265	127	24	in	in	ADP
fis-1265	127	25	this	this	DET
fis-1265	127	26	case	case	NOUN
fis-1265	127	27	the	the	DET
fis-1265	127	28	same	same	ADJ
fis-1265	127	29	sign	sign	NOUN
fis-1265	127	30	.	.	PUNCT
fis-1265	128	1	because	because	SCONJ
fis-1265	128	2	of	of	ADP
fis-1265	128	3	these	these	DET
fis-1265	128	4	forces	force	NOUN
fis-1265	128	5	,	,	PUNCT
fis-1265	128	6	one	one	NUM
fis-1265	128	7	inertial	inertial	ADJ
fis-1265	128	8	mass	mass	NOUN
fis-1265	128	9	rotates	rotate	VERB
fis-1265	128	10	counterclockwise	counterclockwise	NOUN
fis-1265	128	11	,	,	PUNCT
fis-1265	128	12	while	while	SCONJ
fis-1265	128	13	the	the	DET
fis-1265	128	14	other	other	ADJ
fis-1265	128	15	rotates	rotate	VERB
fis-1265	128	16	clockwise	clockwise	NOUN
fis-1265	128	17	by	by	ADP
fis-1265	128	18	an	an	DET
fis-1265	128	19	angle	angle	NOUN
fis-1265	128	20	:	:	PUNCT
fis-1265	128	21	3	3	NUM
fis-1265	128	22	3	3	NUM
fis-1265	128	23	2	2	NUM
fis-1265	128	24	z	z	NOUN
fis-1265	128	25	gm	gm	NOUN
fis-1265	128	26	a	a	DET
fis-1265	128	27	r	r	NOUN
fis-1265	128	28	l	l	NOUN
fis-1265	128	29	g	g	NOUN
fis-1265	128	30	s	s	PROPN
fis-1265	128	31	t	t	PROPN
fis-1265	128	32			PROPN
fis-1265	128	33			PROPN
fis-1265	128	34	(	(	PUNCT
fis-1265	128	35	16	16	NUM
fis-1265	128	36	)	)	PUNCT
fis-1265	128	37	in	in	ADP
fis-1265	128	38	this	this	DET
fis-1265	128	39	case	case	NOUN
fis-1265	128	40	,	,	PUNCT
fis-1265	128	41	therefore	therefore	ADV
fis-1265	128	42	,	,	PUNCT
fis-1265	128	43	frequency	frequency	NOUN
fis-1265	128	44	variations	variation	NOUN
fis-1265	128	45	of	of	ADP
fis-1265	128	46	the	the	DET
fis-1265	128	47	same	same	ADJ
fis-1265	128	48	sign	sign	NOUN
fis-1265	128	49	occur	occur	VERB
fis-1265	128	50	in	in	ADP
fis-1265	128	51	the	the	DET
fis-1265	128	52	torsional	torsional	ADJ
fis-1265	128	53	resonator	resonator	NOUN
fis-1265	128	54	elements	element	NOUN
fis-1265	128	55	1	1	NUM
fis-1265	128	56	and	and	CCONJ
fis-1265	128	57	4	4	NUM
fis-1265	128	58	,	,	PUNCT
fis-1265	128	59	and	and	CCONJ
fis-1265	128	60	in	in	ADP
fis-1265	128	61	the	the	DET
fis-1265	128	62	torsional	torsional	ADJ
fis-1265	128	63	resonator	resonator	NOUN
fis-1265	128	64	elements	element	NOUN
fis-1265	128	65	2	2	NUM
fis-1265	128	66	and	and	CCONJ
fis-1265	128	67	3	3	NUM
fis-1265	128	68	.	.	NOUN
fis-1265	128	69	similarly	similarly	ADV
fis-1265	128	70	to	to	ADP
fis-1265	128	71	what	what	PRON
fis-1265	128	72	done	do	VERB
fis-1265	128	73	for	for	ADP
fis-1265	128	74	the	the	DET
fis-1265	128	75	measure	measure	NOUN
fis-1265	128	76	of	of	ADP
fis-1265	128	77	the	the	DET
fis-1265	128	78	roll	roll	NOUN
fis-1265	128	79	velocity	velocity	NOUN
fis-1265	128	80	,	,	PUNCT
fis-1265	128	81	combining	combine	VERB
fis-1265	128	82	the	the	DET
fis-1265	128	83	readings	reading	NOUN
fis-1265	128	84	of	of	ADP
fis-1265	128	85	the	the	DET
fis-1265	128	86	four	four	NUM
fis-1265	128	87	torsional	torsional	ADJ
fis-1265	128	88	resonators	resonator	NOUN
fis-1265	128	89	,	,	PUNCT
fis-1265	128	90	the	the	DET
fis-1265	128	91	following	follow	VERB
fis-1265	128	92	expression	expression	NOUN
fis-1265	128	93	is	be	AUX
fis-1265	128	94	obtained	obtain	VERB
fis-1265	128	95	,	,	PUNCT
fis-1265	128	96	allowing	allow	VERB
fis-1265	128	97	for	for	ADP
fis-1265	128	98	the	the	DET
fis-1265	128	99	measure	measure	NOUN
fis-1265	128	100	of	of	ADP
fis-1265	128	101	the	the	DET
fis-1265	128	102	external	external	ADJ
fis-1265	128	103	acceleration	acceleration	NOUN
fis-1265	128	104	az	az	NOUN
fis-1265	128	105	:	:	PUNCT
fis-1265	129	1	v.	v.	ADP
fis-1265	129	2	zega	zega	PROPN
fis-1265	129	3	et	et	PROPN
fis-1265	129	4	alii	alii	PROPN
fis-1265	129	5	,	,	PUNCT
fis-1265	129	6	frattura	frattura	PROPN
fis-1265	129	7	ed	ed	PROPN
fis-1265	129	8	integrità	integrità	PROPN
fis-1265	129	9	strutturale	strutturale	PROPN
fis-1265	129	10	,	,	PUNCT
fis-1265	129	11	29	29	NUM
fis-1265	129	12	(	(	PUNCT
fis-1265	129	13	2014	2014	NUM
fis-1265	129	14	)	)	PUNCT
fis-1265	129	15	334	334	NUM
fis-1265	129	16	-	-	SYM
fis-1265	129	17	342	342	NUM
fis-1265	129	18	;	;	PUNCT
fis-1265	129	19	doi	doi	NOUN
fis-1265	129	20	:	:	PUNCT
fis-1265	129	21	10.3221	10.3221	NUM
fis-1265	129	22	/	/	SYM
fis-1265	129	23	igf	igf	PROPN
fis-1265	129	24	-	-	PROPN
fis-1265	129	25	esis.29.29	esis.29.29	PROPN
fis-1265	129	26	340	340	NUM
fis-1265	129	27	2	2	NUM
fis-1265	129	28	1	1	NUM
fis-1265	129	29	3	3	NUM
fis-1265	129	30	4	4	NUM
fis-1265	129	31	0	0	NUM
fis-1265	129	32	0	0	NUM
fis-1265	129	33	3	3	NUM
fis-1265	129	34	0	0	NUM
fis-1265	129	35	0	0	NUM
fis-1265	129	36	6	6	NUM
fis-1265	129	37	9	9	NUM
fis-1265	129	38	ge	ge	X
fis-1265	129	39	e	e	PROPN
fis-1265	129	40	z	z	NOUN
fis-1265	129	41	m	m	VERB
fis-1265	129	42	e	e	NOUN
fis-1265	129	43	m	m	NOUN
fis-1265	129	44	e	e	NOUN
fis-1265	129	45	m	m	VERB
fis-1265	129	46	rk	rk	NOUN
fis-1265	129	47	kr	kr	PROPN
fis-1265	129	48	r	r	NOUN
fis-1265	129	49	l	l	NOUN
fis-1265	130	1	a	a	X
fis-1265	130	2	k	k	X
fis-1265	131	1	k	k	PROPN
fis-1265	131	2	g	g	PROPN
fis-1265	132	1	k	k	PROPN
fis-1265	132	2	k	k	PROPN
fis-1265	133	1	g	g	PROPN
fis-1265	133	2	g	g	PROPN
fis-1265	133	3	s	s	PROPN
fis-1265	133	4	t	t	NOUN
fis-1265	133	5			ADJ
fis-1265	133	6			PROPN
fis-1265	133	7			ADJ
fis-1265	133	8			PROPN
fis-1265	133	9			PROPN
fis-1265	133	10			PROPN
fis-1265	133	11			NOUN
fis-1265	133	12			VERB
fis-1265	133	13			PROPN
fis-1265	133	14			X
fis-1265	133	15			NUM
fis-1265	133	16			PROPN
fis-1265	133	17			PROPN
fis-1265	133	18	(	(	PUNCT
fis-1265	133	19	17	17	NUM
fis-1265	133	20	)	)	PUNCT
fis-1265	133	21	fabricated	fabricate	VERB
fis-1265	133	22	device	device	NOUN
fis-1265	133	23	he	he	PRON
fis-1265	133	24	designed	design	VERB
fis-1265	133	25	integrated	integrated	ADJ
fis-1265	133	26	structure	structure	NOUN
fis-1265	133	27	has	have	AUX
fis-1265	133	28	been	be	AUX
fis-1265	133	29	produced	produce	VERB
fis-1265	133	30	with	with	ADP
fis-1265	133	31	the	the	DET
fis-1265	133	32	surface	surface	NOUN
fis-1265	133	33	micromachining	micromachine	VERB
fis-1265	133	34	process	process	NOUN
fis-1265	133	35	thelma	thelma	PROPN
fis-1265	133	36	©	©	PROPN
fis-1265	133	37	which	which	PRON
fis-1265	133	38	has	have	AUX
fis-1265	133	39	been	be	AUX
fis-1265	133	40	developed	develop	VERB
fis-1265	133	41	by	by	ADP
fis-1265	133	42	stmicroelectronics	stmicroelectronic	NOUN
fis-1265	133	43	to	to	PART
fis-1265	133	44	realize	realize	VERB
fis-1265	133	45	silicon	silicon	NOUN
fis-1265	133	46	inertial	inertial	ADJ
fis-1265	133	47	sensors	sensor	NOUN
fis-1265	133	48	and	and	CCONJ
fis-1265	133	49	actuators	actuator	NOUN
fis-1265	133	50	.	.	PUNCT
fis-1265	134	1	the	the	DET
fis-1265	134	2	main	main	ADJ
fis-1265	134	3	process	process	NOUN
fis-1265	134	4	phases	phase	NOUN
fis-1265	134	5	are	be	AUX
fis-1265	134	6	substrate	substrate	NOUN
fis-1265	134	7	thermal	thermal	ADJ
fis-1265	134	8	oxidation	oxidation	NOUN
fis-1265	134	9	,	,	PUNCT
fis-1265	134	10	deposition	deposition	NOUN
fis-1265	134	11	and	and	CCONJ
fis-1265	134	12	patterning	patterning	NOUN
fis-1265	134	13	of	of	ADP
fis-1265	134	14	horizontal	horizontal	ADJ
fis-1265	134	15	interconnections	interconnection	NOUN
fis-1265	134	16	,	,	PUNCT
fis-1265	134	17	deposition	deposition	NOUN
fis-1265	134	18	and	and	CCONJ
fis-1265	134	19	patterning	patterning	NOUN
fis-1265	134	20	of	of	ADP
fis-1265	134	21	a	a	DET
fis-1265	134	22	sacrificial	sacrificial	ADJ
fis-1265	134	23	layer	layer	NOUN
fis-1265	134	24	,	,	PUNCT
fis-1265	134	25	epitaxial	epitaxial	ADJ
fis-1265	134	26	growth	growth	NOUN
fis-1265	134	27	of	of	ADP
fis-1265	134	28	the	the	DET
fis-1265	134	29	structural	structural	ADJ
fis-1265	134	30	layer	layer	NOUN
fis-1265	134	31	,	,	PUNCT
fis-1265	134	32	structural	structural	ADJ
fis-1265	134	33	layer	layer	NOUN
fis-1265	134	34	patterning	pattern	VERB
fis-1265	134	35	by	by	ADP
fis-1265	134	36	trench	trench	NOUN
fis-1265	134	37	etch	etch	NOUN
fis-1265	134	38	and	and	CCONJ
fis-1265	134	39	sacrificial	sacrificial	ADJ
fis-1265	134	40	oxide	oxide	NOUN
fis-1265	134	41	removal	removal	NOUN
fis-1265	134	42	and	and	CCONJ
fis-1265	134	43	contact	contact	NOUN
fis-1265	134	44	metallization	metallization	NOUN
fis-1265	134	45	deposition	deposition	NOUN
fis-1265	134	46	(	(	PUNCT
fis-1265	134	47	see	see	VERB
fis-1265	134	48	[	[	X
fis-1265	134	49	6	6	NUM
fis-1265	134	50	]	]	PUNCT
fis-1265	134	51	for	for	ADP
fis-1265	134	52	more	more	ADJ
fis-1265	134	53	details	detail	NOUN
fis-1265	134	54	)	)	PUNCT
fis-1265	134	55	.	.	PUNCT
fis-1265	135	1	the	the	DET
fis-1265	135	2	inertial	inertial	ADJ
fis-1265	135	3	masses	masse	NOUN
fis-1265	135	4	of	of	ADP
fis-1265	135	5	the	the	DET
fis-1265	135	6	integrated	integrate	VERB
fis-1265	135	7	structures	structure	NOUN
fis-1265	135	8	and	and	CCONJ
fis-1265	135	9	the	the	DET
fis-1265	135	10	proof	proof	ADJ
fis-1265	135	11	masses	masse	NOUN
fis-1265	135	12	of	of	ADP
fis-1265	135	13	the	the	DET
fis-1265	135	14	torsional	torsional	ADJ
fis-1265	135	15	resonators	resonator	NOUN
fis-1265	135	16	have	have	VERB
fis-1265	135	17	holes	hole	NOUN
fis-1265	135	18	to	to	PART
fis-1265	135	19	allow	allow	VERB
fis-1265	135	20	the	the	DET
fis-1265	135	21	complete	complete	ADJ
fis-1265	135	22	oxide	oxide	NOUN
fis-1265	135	23	removal	removal	NOUN
fis-1265	135	24	below	below	ADP
fis-1265	135	25	it	it	PRON
fis-1265	135	26	.	.	PUNCT
fis-1265	136	1	the	the	DET
fis-1265	136	2	produced	produce	VERB
fis-1265	136	3	integrated	integrated	ADJ
fis-1265	136	4	structure	structure	NOUN
fis-1265	136	5	is	be	AUX
fis-1265	136	6	shown	show	VERB
fis-1265	136	7	in	in	ADP
fis-1265	136	8	the	the	DET
fis-1265	136	9	sem	sem	NOUN
fis-1265	136	10	micrograph	micrograph	NOUN
fis-1265	136	11	of	of	ADP
fis-1265	136	12	fig	fig	NOUN
fis-1265	136	13	.	.	PUNCT
fis-1265	137	1	5	5	NUM
fis-1265	137	2	.	.	X
fis-1265	137	3	the	the	DET
fis-1265	137	4	integrated	integrate	VERB
fis-1265	137	5	structure	structure	NOUN
fis-1265	137	6	is	be	AUX
fis-1265	137	7	packed	pack	VERB
fis-1265	137	8	at	at	ADP
fis-1265	137	9	the	the	DET
fis-1265	137	10	pressure	pressure	NOUN
fis-1265	137	11	of	of	ADP
fis-1265	137	12	1	1	NUM
fis-1265	137	13	mbar	mbar	NOUN
fis-1265	137	14	with	with	ADP
fis-1265	137	15	getter	getter	NOUN
fis-1265	137	16	to	to	PART
fis-1265	137	17	avoid	avoid	VERB
fis-1265	137	18	degasing	degas	VERB
fis-1265	137	19	.	.	PUNCT
fis-1265	138	1	figure	figure	NOUN
fis-1265	138	2	5	5	NUM
fis-1265	138	3	:	:	PUNCT
fis-1265	138	4	sem	sem	ADJ
fis-1265	138	5	image	image	NOUN
fis-1265	138	6	of	of	ADP
fis-1265	138	7	the	the	DET
fis-1265	138	8	integrated	integrate	VERB
fis-1265	138	9	structure	structure	NOUN
fis-1265	138	10	for	for	ADP
fis-1265	138	11	a	a	DET
fis-1265	138	12	resonant	resonant	ADJ
fis-1265	138	13	micro	micro	NOUN
fis-1265	138	14	-	-	NOUN
fis-1265	138	15	gyroscope	gyroscope	NOUN
fis-1265	138	16	and	and	CCONJ
fis-1265	138	17	accelerometer	accelerometer	NOUN
fis-1265	138	18	numerical	numerical	ADJ
fis-1265	138	19	analyses	analysis	NOUN
fis-1265	138	20	the	the	DET
fis-1265	138	21	eigenmodes	eigenmode	NOUN
fis-1265	138	22	of	of	ADP
fis-1265	138	23	the	the	DET
fis-1265	138	24	device	device	NOUN
fis-1265	138	25	have	have	AUX
fis-1265	138	26	been	be	AUX
fis-1265	138	27	calculated	calculate	VERB
fis-1265	138	28	through	through	ADP
fis-1265	138	29	a	a	DET
fis-1265	138	30	three	three	NUM
fis-1265	138	31	dimensional	dimensional	ADJ
fis-1265	138	32	finite	finite	ADJ
fis-1265	138	33	element	element	NOUN
fis-1265	138	34	analysis	analysis	NOUN
fis-1265	138	35	performed	perform	VERB
fis-1265	138	36	by	by	ADP
fis-1265	138	37	the	the	DET
fis-1265	138	38	commercial	commercial	ADJ
fis-1265	138	39	code	code	NOUN
fis-1265	138	40	comsolmulthyphisics	comsolmulthyphisic	NOUN
fis-1265	138	41	©	©	NOUN
fis-1265	138	42	:	:	PUNCT
fis-1265	138	43	the	the	DET
fis-1265	138	44	first	first	ADJ
fis-1265	138	45	6	6	NUM
fis-1265	138	46	modes	mode	NOUN
fis-1265	138	47	together	together	ADV
fis-1265	138	48	with	with	ADP
fis-1265	138	49	the	the	DET
fis-1265	138	50	first	first	ADJ
fis-1265	138	51	bending	bend	VERB
fis-1265	138	52	mode	mode	NOUN
fis-1265	138	53	of	of	ADP
fis-1265	138	54	the	the	DET
fis-1265	138	55	beam	beam	NOUN
fis-1265	138	56	resonators	resonator	NOUN
fis-1265	138	57	(	(	PUNCT
fis-1265	138	58	21st	21st	ADJ
fis-1265	138	59	mode	mode	NOUN
fis-1265	138	60	for	for	ADP
fis-1265	138	61	the	the	DET
fis-1265	138	62	whole	whole	ADJ
fis-1265	138	63	structure	structure	NOUN
fis-1265	138	64	)	)	PUNCT
fis-1265	138	65	are	be	AUX
fis-1265	138	66	reported	report	VERB
fis-1265	138	67	in	in	ADP
fis-1265	138	68	tab	tab	NOUN
fis-1265	138	69	.	.	PUNCT
fis-1265	138	70	1	1	NUM
fis-1265	138	71	along	along	ADP
fis-1265	138	72	with	with	ADP
fis-1265	138	73	small	small	ADJ
fis-1265	138	74	pictures	picture	NOUN
fis-1265	138	75	of	of	ADP
fis-1265	138	76	the	the	DET
fis-1265	138	77	corresponding	corresponding	ADJ
fis-1265	138	78	modal	modal	ADJ
fis-1265	138	79	shape	shape	NOUN
fis-1265	138	80	.	.	PUNCT
fis-1265	139	1	for	for	ADP
fis-1265	139	2	the	the	DET
fis-1265	139	3	sake	sake	NOUN
fis-1265	139	4	of	of	ADP
fis-1265	139	5	an	an	DET
fis-1265	139	6	easier	easy	ADJ
fis-1265	139	7	visualization	visualization	NOUN
fis-1265	139	8	,	,	PUNCT
fis-1265	139	9	the	the	DET
fis-1265	139	10	contours	contours	NOUN
fis-1265	139	11	of	of	ADP
fis-1265	139	12	the	the	DET
fis-1265	139	13	magnitude	magnitude	NOUN
fis-1265	139	14	of	of	ADP
fis-1265	139	15	the	the	DET
fis-1265	139	16	displacement	displacement	NOUN
fis-1265	139	17	are	be	AUX
fis-1265	139	18	shown	show	VERB
fis-1265	139	19	on	on	ADP
fis-1265	139	20	the	the	DET
fis-1265	139	21	modal	modal	ADJ
fis-1265	139	22	shapes	shape	NOUN
fis-1265	139	23	.	.	PUNCT
fis-1265	140	1	the	the	DET
fis-1265	140	2	driving	drive	VERB
fis-1265	140	3	modes	mode	NOUN
fis-1265	140	4	for	for	ADP
fis-1265	140	5	the	the	DET
fis-1265	140	6	inertial	inertial	ADJ
fis-1265	140	7	masses	masse	NOUN
fis-1265	140	8	is	be	AUX
fis-1265	140	9	around	around	ADV
fis-1265	140	10	10	10	NUM
fis-1265	140	11	khz	khz	NOUN
fis-1265	140	12	,	,	PUNCT
fis-1265	140	13	the	the	DET
fis-1265	140	14	natural	natural	ADJ
fis-1265	140	15	frequency	frequency	NOUN
fis-1265	140	16	of	of	ADP
fis-1265	140	17	the	the	DET
fis-1265	140	18	torsional	torsional	ADJ
fis-1265	140	19	resonators	resonator	NOUN
fis-1265	140	20	is	be	AUX
fis-1265	140	21	22.5	22.5	NUM
fis-1265	140	22	khz	khz	NOUN
fis-1265	140	23	and	and	CCONJ
fis-1265	140	24	the	the	DET
fis-1265	140	25	natural	natural	ADJ
fis-1265	140	26	frequency	frequency	NOUN
fis-1265	140	27	of	of	ADP
fis-1265	140	28	the	the	DET
fis-1265	140	29	bending	bend	VERB
fis-1265	140	30	resonators	resonator	NOUN
fis-1265	140	31	is	be	AUX
fis-1265	140	32	243	243	NUM
fis-1265	140	33	khz	khz	NOUN
fis-1265	140	34	.	.	PUNCT
fis-1265	141	1	note	note	VERB
fis-1265	141	2	that	that	SCONJ
fis-1265	141	3	the	the	DET
fis-1265	141	4	resonators	resonator	NOUN
fis-1265	141	5	have	have	AUX
fis-1265	141	6	been	be	AUX
fis-1265	141	7	designed	design	VERB
fis-1265	141	8	to	to	PART
fis-1265	141	9	oscillate	oscillate	VERB
fis-1265	141	10	at	at	ADP
fis-1265	141	11	very	very	ADV
fis-1265	141	12	different	different	ADJ
fis-1265	141	13	frequencies	frequency	NOUN
fis-1265	141	14	in	in	ADP
fis-1265	141	15	order	order	NOUN
fis-1265	141	16	to	to	PART
fis-1265	141	17	obtain	obtain	VERB
fis-1265	141	18	similar	similar	ADJ
fis-1265	141	19	sensitivities	sensitivity	NOUN
fis-1265	141	20	for	for	ADP
fis-1265	141	21	the	the	DET
fis-1265	141	22	out	out	ADJ
fis-1265	141	23	-	-	PUNCT
fis-1265	141	24	of	of	ADP
fis-1265	141	25	-	-	PUNCT
fis-1265	141	26	plane	plane	NOUN
fis-1265	141	27	and	and	CCONJ
fis-1265	141	28	in	in	ADP
fis-1265	141	29	-	-	PUNCT
fis-1265	141	30	plane	plane	NOUN
fis-1265	141	31	external	external	ADJ
fis-1265	141	32	acceleration	acceleration	NOUN
fis-1265	141	33	and	and	CCONJ
fis-1265	141	34	angular	angular	ADJ
fis-1265	141	35	velocity	velocity	NOUN
fis-1265	141	36	components	component	NOUN
fis-1265	141	37	.	.	PUNCT
fis-1265	142	1	the	the	DET
fis-1265	142	2	separation	separation	NOUN
fis-1265	142	3	of	of	ADP
fis-1265	142	4	the	the	DET
fis-1265	142	5	frequencies	frequency	NOUN
fis-1265	142	6	also	also	ADV
fis-1265	142	7	ensure	ensure	VERB
fis-1265	142	8	a	a	DET
fis-1265	142	9	very	very	ADV
fis-1265	142	10	low	low	ADJ
fis-1265	142	11	cross	cross	NOUN
fis-1265	142	12	-	-	NOUN
fis-1265	142	13	talk	talk	NOUN
fis-1265	142	14	in	in	ADP
fis-1265	142	15	sensing	sense	VERB
fis-1265	142	16	.	.	PUNCT
fis-1265	143	1	with	with	ADP
fis-1265	143	2	a	a	DET
fis-1265	143	3	size	size	NOUN
fis-1265	143	4	of	of	ADP
fis-1265	143	5	the	the	DET
fis-1265	143	6	two	two	NUM
fis-1265	143	7	inertial	inertial	ADJ
fis-1265	143	8	masses	masse	NOUN
fis-1265	143	9	of	of	ADP
fis-1265	143	10	approximately	approximately	ADV
fis-1265	143	11	420	420	NUM
fis-1265	143	12	µm	µm	NOUN
fis-1265	143	13	x	x	PROPN
fis-1265	143	14	470	470	NUM
fis-1265	143	15	µm	µm	NOUN
fis-1265	143	16	x	x	SYM
fis-1265	143	17	22	22	NUM
fis-1265	143	18	µm	µm	NOUN
fis-1265	143	19	and	and	CCONJ
fis-1265	143	20	a	a	DET
fis-1265	143	21	bias	bias	NOUN
fis-1265	143	22	voltage	voltage	NOUN
fis-1265	143	23	of	of	ADP
fis-1265	143	24	6v	6v	NOUN
fis-1265	143	25	,	,	PUNCT
fis-1265	143	26	the	the	DET
fis-1265	143	27	expected	expect	VERB
fis-1265	143	28	sensitivity	sensitivity	NOUN
fis-1265	143	29	as	as	ADP
fis-1265	143	30	accelerometer	accelerometer	NOUN
fis-1265	143	31	in	in	ADP
fis-1265	143	32	both	both	PRON
fis-1265	143	33	of	of	ADP
fis-1265	143	34	the	the	DET
fis-1265	143	35	directions	direction	NOUN
fis-1265	143	36	y	y	PROPN
fis-1265	143	37	and	and	CCONJ
fis-1265	143	38	z	z	PROPN
fis-1265	143	39	is	be	AUX
fis-1265	143	40	higher	high	ADJ
fis-1265	143	41	than	than	ADP
fis-1265	143	42	350	350	NUM
fis-1265	143	43	hz	hz	NOUN
fis-1265	143	44	/	/	SYM
fis-1265	143	45	g	g	NOUN
fis-1265	143	46	,	,	PUNCT
fis-1265	143	47	while	while	SCONJ
fis-1265	143	48	the	the	DET
fis-1265	143	49	sensitivity	sensitivity	NOUN
fis-1265	143	50	as	as	ADP
fis-1265	143	51	gyroscope	gyroscope	NOUN
fis-1265	143	52	is	be	AUX
fis-1265	143	53	approximately	approximately	ADV
fis-1265	143	54	0.15	0.15	NUM
fis-1265	143	55	hz/	hz/	NOUN
fis-1265	143	56	°	°	NOUN
fis-1265	143	57	/s	/	NOUN
fis-1265	143	58	.	.	PUNCT
fis-1265	144	1	the	the	DET
fis-1265	144	2	experimental	experimental	ADJ
fis-1265	144	3	characterization	characterization	NOUN
fis-1265	144	4	of	of	ADP
fis-1265	144	5	the	the	DET
fis-1265	144	6	device	device	NOUN
fis-1265	144	7	is	be	AUX
fis-1265	144	8	currently	currently	ADV
fis-1265	144	9	under	under	ADP
fis-1265	144	10	development	development	NOUN
fis-1265	144	11	.	.	PUNCT
fis-1265	145	1	t	t	PROPN
fis-1265	145	2	v.	v.	CCONJ
fis-1265	145	3	zega	zega	PROPN
fis-1265	145	4	et	et	PROPN
fis-1265	145	5	alii	alii	PROPN
fis-1265	145	6	,	,	PUNCT
fis-1265	145	7	frattura	frattura	PROPN
fis-1265	145	8	ed	ed	PROPN
fis-1265	145	9	integrità	integrità	PROPN
fis-1265	145	10	strutturale	strutturale	PROPN
fis-1265	145	11	,	,	PUNCT
fis-1265	145	12	29	29	NUM
fis-1265	145	13	(	(	PUNCT
fis-1265	145	14	2014	2014	NUM
fis-1265	145	15	)	)	PUNCT
fis-1265	145	16	334	334	NUM
fis-1265	145	17	-	-	SYM
fis-1265	145	18	342	342	NUM
fis-1265	145	19	;	;	PUNCT
fis-1265	145	20	doi	doi	NOUN
fis-1265	145	21	:	:	PUNCT
fis-1265	145	22	10.3221	10.3221	NUM
fis-1265	145	23	/	/	SYM
fis-1265	145	24	igf	igf	PROPN
fis-1265	145	25	-	-	PUNCT
fis-1265	145	26	esis.29.29	esis.29.29	PROPN
fis-1265	145	27	341	341	NUM
fis-1265	145	28	mode	mode	NOUN
fis-1265	145	29	#	#	NOUN
fis-1265	145	30	frequency	frequency	NOUN
fis-1265	145	31	(	(	PUNCT
fis-1265	145	32	khz	khz	NOUN
fis-1265	145	33	)	)	PUNCT
fis-1265	145	34	description	description	NOUN
fis-1265	145	35	1	1	NUM
fis-1265	145	36	1.33	1.33	NUM
fis-1265	145	37	in	in	ADP
fis-1265	145	38	-	-	PUNCT
fis-1265	145	39	plane	plane	NOUN
fis-1265	145	40	translation	translation	NOUN
fis-1265	145	41	of	of	ADP
fis-1265	145	42	the	the	DET
fis-1265	145	43	whole	whole	ADJ
fis-1265	145	44	mass	mass	NOUN
fis-1265	145	45	along	along	ADP
fis-1265	145	46	y	y	NOUN
fis-1265	145	47	-	-	PUNCT
fis-1265	145	48	axis	axis	NOUN
fis-1265	145	49	2	2	NUM
fis-1265	145	50	2.26	2.26	NUM
fis-1265	145	51	out	out	ADP
fis-1265	145	52	-	-	PUNCT
fis-1265	145	53	of	of	ADP
fis-1265	145	54	–	–	PUNCT
fis-1265	145	55	plane	plane	NOUN
fis-1265	145	56	rotation	rotation	NOUN
fis-1265	145	57	of	of	ADP
fis-1265	145	58	the	the	DET
fis-1265	145	59	whole	whole	ADJ
fis-1265	145	60	mass	mass	NOUN
fis-1265	145	61	around	around	ADP
fis-1265	145	62	axis	axis	NOUN
fis-1265	145	63	a	a	PRON
fis-1265	145	64	–	–	PUNCT
fis-1265	145	65	a	a	DET
fis-1265	145	66	3	3	NUM
fis-1265	145	67	10.11	10.11	NUM
fis-1265	145	68	in	in	ADP
fis-1265	145	69	-	-	PUNCT
fis-1265	145	70	plane	plane	NOUN
fis-1265	145	71	translation	translation	NOUN
fis-1265	145	72	of	of	ADP
fis-1265	145	73	the	the	DET
fis-1265	145	74	whole	whole	ADJ
fis-1265	145	75	mass	mass	NOUN
fis-1265	145	76	along	along	ADP
fis-1265	145	77	x	x	NOUN
fis-1265	145	78	-	-	NOUN
fis-1265	145	79	axis	axis	ADJ
fis-1265	145	80	(	(	PUNCT
fis-1265	145	81	driving	driving	NOUN
fis-1265	145	82	mode	mode	NOUN
fis-1265	145	83	)	)	PUNCT
fis-1265	145	84	4	4	NUM
fis-1265	145	85	12.61	12.61	NUM
fis-1265	145	86	in	in	ADP
fis-1265	145	87	-	-	PUNCT
fis-1265	145	88	plane	plane	NOUN
fis-1265	145	89	rotation	rotation	NOUN
fis-1265	145	90	of	of	ADP
fis-1265	145	91	the	the	DET
fis-1265	145	92	whole	whole	ADJ
fis-1265	145	93	mass	mass	NOUN
fis-1265	145	94	around	around	ADP
fis-1265	145	95	z	z	NOUN
fis-1265	145	96	-	-	PUNCT
fis-1265	145	97	axis	axis	ADJ
fis-1265	145	98	5	5	NUM
fis-1265	145	99	13.44	13.44	NUM
fis-1265	145	100	torsional	torsional	ADJ
fis-1265	145	101	mode	mode	NOUN
fis-1265	145	102	of	of	ADP
fis-1265	145	103	the	the	DET
fis-1265	145	104	proof	proof	NOUN
fis-1265	145	105	mass	mass	VERB
fis-1265	145	106	6	6	NUM
fis-1265	145	107	22.52	22.52	NUM
fis-1265	145	108	first	first	ADJ
fis-1265	145	109	mode	mode	NOUN
fis-1265	145	110	of	of	ADP
fis-1265	145	111	torsional	torsional	ADJ
fis-1265	145	112	resonators	resonator	NOUN
fis-1265	145	113	21	21	NUM
fis-1265	145	114	243	243	NUM
fis-1265	145	115	first	first	ADJ
fis-1265	145	116	mode	mode	NOUN
fis-1265	145	117	of	of	ADP
fis-1265	145	118	bending	bend	VERB
fis-1265	145	119	resonators	resonator	NOUN
fis-1265	145	120	table	table	NOUN
fis-1265	145	121	1	1	NUM
fis-1265	145	122	:	:	PUNCT
fis-1265	145	123	principal	principal	ADJ
fis-1265	145	124	modes	mode	NOUN
fis-1265	145	125	of	of	ADP
fis-1265	145	126	the	the	DET
fis-1265	145	127	device	device	NOUN
fis-1265	145	128	.	.	PUNCT
fis-1265	146	1	because	because	SCONJ
fis-1265	146	2	of	of	ADP
fis-1265	146	3	the	the	DET
fis-1265	146	4	device	device	NOUN
fis-1265	146	5	’s	’s	PART
fis-1265	146	6	symmetry	symmetry	NOUN
fis-1265	146	7	only	only	ADV
fis-1265	146	8	one	one	NUM
fis-1265	146	9	half	half	NOUN
fis-1265	146	10	of	of	ADP
fis-1265	146	11	it	it	PRON
fis-1265	146	12	is	be	AUX
fis-1265	146	13	plotted	plot	VERB
fis-1265	146	14	.	.	PUNCT
fis-1265	147	1	x	x	PUNCT
fis-1265	147	2	y	y	PROPN
fis-1265	147	3	z	z	PROPN
fis-1265	147	4	a	a	PRON
fis-1265	147	5	a	a	PRON
fis-1265	147	6	v.	v.	ADP
fis-1265	147	7	zega	zega	PROPN
fis-1265	147	8	et	et	PROPN
fis-1265	147	9	alii	alii	PROPN
fis-1265	147	10	,	,	PUNCT
fis-1265	147	11	frattura	frattura	PROPN
fis-1265	147	12	ed	ed	PROPN
fis-1265	147	13	integrità	integrità	PROPN
fis-1265	147	14	strutturale	strutturale	PROPN
fis-1265	147	15	,	,	PUNCT
fis-1265	147	16	29	29	NUM
fis-1265	147	17	(	(	PUNCT
fis-1265	147	18	2014	2014	NUM
fis-1265	147	19	)	)	PUNCT
fis-1265	147	20	334	334	NUM
fis-1265	147	21	-	-	SYM
fis-1265	147	22	342	342	NUM
fis-1265	147	23	;	;	PUNCT
fis-1265	147	24	doi	doi	NOUN
fis-1265	147	25	:	:	PUNCT
fis-1265	147	26	10.3221	10.3221	NUM
fis-1265	147	27	/	/	SYM
fis-1265	147	28	igf	igf	PROPN
fis-1265	147	29	-	-	PUNCT
fis-1265	147	30	esis.29.29	esis.29.29	PROPN
fis-1265	147	31	342	342	NUM
fis-1265	147	32	conclusion	conclusion	NOUN
fis-1265	147	33	n	n	ADP
fis-1265	147	34	the	the	DET
fis-1265	147	35	present	present	ADJ
fis-1265	147	36	work	work	NOUN
fis-1265	147	37	,	,	PUNCT
fis-1265	147	38	an	an	DET
fis-1265	147	39	innovative	innovative	ADJ
fis-1265	147	40	resonant	resonant	ADJ
fis-1265	147	41	four	four	NUM
fis-1265	147	42	-	-	PUNCT
fis-1265	147	43	axis	axis	NOUN
fis-1265	147	44	inertial	inertial	ADJ
fis-1265	147	45	sensor	sensor	NOUN
fis-1265	147	46	has	have	AUX
fis-1265	147	47	been	be	AUX
fis-1265	147	48	designed	design	VERB
fis-1265	147	49	,	,	PUNCT
fis-1265	147	50	modelled	model	VERB
fis-1265	147	51	and	and	CCONJ
fis-1265	147	52	fabricated	fabricate	VERB
fis-1265	147	53	.	.	PUNCT
fis-1265	148	1	analytical	analytical	ADJ
fis-1265	148	2	and	and	CCONJ
fis-1265	148	3	numerical	numerical	PROPN
fis-1265	148	4	finite	finite	PROPN
fis-1265	148	5	elements	element	NOUN
fis-1265	148	6	simulations	simulation	NOUN
fis-1265	148	7	have	have	AUX
fis-1265	148	8	been	be	AUX
fis-1265	148	9	used	use	VERB
fis-1265	148	10	during	during	ADP
fis-1265	148	11	the	the	DET
fis-1265	148	12	design	design	NOUN
fis-1265	148	13	phase	phase	NOUN
fis-1265	148	14	for	for	ADP
fis-1265	148	15	the	the	DET
fis-1265	148	16	evaluation	evaluation	NOUN
fis-1265	148	17	of	of	ADP
fis-1265	148	18	the	the	DET
fis-1265	148	19	device	device	NOUN
fis-1265	148	20	performances	performance	NOUN
fis-1265	148	21	and	and	CCONJ
fis-1265	148	22	for	for	ADP
fis-1265	148	23	the	the	DET
fis-1265	148	24	maximization	maximization	NOUN
fis-1265	148	25	of	of	ADP
fis-1265	148	26	its	its	PRON
fis-1265	148	27	sensitivity	sensitivity	NOUN
fis-1265	148	28	.	.	PUNCT
fis-1265	149	1	the	the	DET
fis-1265	149	2	resulting	result	VERB
fis-1265	149	3	structure	structure	NOUN
fis-1265	149	4	has	have	VERB
fis-1265	149	5	only	only	ADV
fis-1265	149	6	two	two	NUM
fis-1265	149	7	inertial	inertial	ADJ
fis-1265	149	8	masses	masse	NOUN
fis-1265	149	9	and	and	CCONJ
fis-1265	149	10	,	,	PUNCT
fis-1265	149	11	despite	despite	SCONJ
fis-1265	149	12	its	its	PRON
fis-1265	149	13	extremely	extremely	ADV
fis-1265	149	14	reduced	reduce	VERB
fis-1265	149	15	dimensions	dimension	NOUN
fis-1265	149	16	,	,	PUNCT
fis-1265	149	17	enables	enable	VERB
fis-1265	149	18	differential	differential	ADJ
fis-1265	149	19	detection	detection	NOUN
fis-1265	149	20	of	of	ADP
fis-1265	149	21	two	two	NUM
fis-1265	149	22	different	different	ADJ
fis-1265	149	23	angular	angular	ADJ
fis-1265	149	24	velocities	velocity	NOUN
fis-1265	149	25	and	and	CCONJ
fis-1265	149	26	of	of	ADP
fis-1265	149	27	two	two	NUM
fis-1265	149	28	different	different	ADJ
fis-1265	149	29	linear	linear	ADJ
fis-1265	149	30	acceleration	acceleration	NOUN
fis-1265	149	31	components	component	NOUN
fis-1265	149	32	.	.	PUNCT
fis-1265	150	1	resonant	resonant	ADJ
fis-1265	150	2	detection	detection	NOUN
fis-1265	150	3	is	be	AUX
fis-1265	150	4	used	use	VERB
fis-1265	150	5	for	for	ADP
fis-1265	150	6	the	the	DET
fis-1265	150	7	four	four	NUM
fis-1265	150	8	axis	axis	NOUN
fis-1265	150	9	,	,	PUNCT
fis-1265	150	10	with	with	ADP
fis-1265	150	11	two	two	NUM
fis-1265	150	12	different	different	ADJ
fis-1265	150	13	kind	kind	NOUN
fis-1265	150	14	of	of	ADP
fis-1265	150	15	resonators	resonator	NOUN
fis-1265	150	16	respectively	respectively	ADV
fis-1265	150	17	oscillating	oscillate	VERB
fis-1265	150	18	in	in	ADP
fis-1265	150	19	bending	bending	NOUN
fis-1265	150	20	and	and	CCONJ
fis-1265	150	21	in	in	ADP
fis-1265	150	22	torsion	torsion	NOUN
fis-1265	150	23	.	.	PUNCT
fis-1265	151	1	the	the	DET
fis-1265	151	2	differential	differential	ADJ
fis-1265	151	3	reading	reading	NOUN
fis-1265	151	4	enables	enable	VERB
fis-1265	151	5	detection	detection	NOUN
fis-1265	151	6	of	of	ADP
fis-1265	151	7	the	the	DET
fis-1265	151	8	external	external	ADJ
fis-1265	151	9	quantities	quantity	NOUN
fis-1265	151	10	even	even	ADV
fis-1265	151	11	in	in	ADP
fis-1265	151	12	the	the	DET
fis-1265	151	13	presence	presence	NOUN
fis-1265	151	14	of	of	ADP
fis-1265	151	15	eigenstresses	eigenstresse	NOUN
fis-1265	151	16	due	due	ADJ
fis-1265	151	17	e.g.	e.g.	ADV
fis-1265	151	18	to	to	ADP
fis-1265	151	19	temperature	temperature	NOUN
fis-1265	151	20	variations	variation	NOUN
fis-1265	151	21	.	.	PUNCT
fis-1265	152	1	moreover	moreover	ADV
fis-1265	152	2	,	,	PUNCT
fis-1265	152	3	the	the	DET
fis-1265	152	4	differential	differential	ADJ
fis-1265	152	5	reading	reading	NOUN
fis-1265	152	6	increases	increase	VERB
fis-1265	152	7	the	the	DET
fis-1265	152	8	range	range	NOUN
fis-1265	152	9	of	of	ADP
fis-1265	152	10	linearity	linearity	NOUN
fis-1265	152	11	and	and	CCONJ
fis-1265	152	12	the	the	DET
fis-1265	152	13	sensitivity	sensitivity	NOUN
fis-1265	152	14	of	of	ADP
fis-1265	152	15	the	the	DET
fis-1265	152	16	proposed	propose	VERB
fis-1265	152	17	inertial	inertial	ADJ
fis-1265	152	18	sensor	sensor	NOUN
fis-1265	152	19	.	.	PUNCT
fis-1265	153	1	references	reference	NOUN
fis-1265	153	2	[	[	X
fis-1265	153	3	1	1	NUM
fis-1265	153	4	]	]	X
fis-1265	153	5	senturia	senturia	NOUN
fis-1265	153	6	,	,	PUNCT
fis-1265	153	7	s.d	s.d	PROPN
fis-1265	153	8	.	.	PROPN
fis-1265	153	9	,	,	PUNCT
fis-1265	153	10	microsystem	microsystem	NOUN
fis-1265	153	11	design	design	PROPN
fis-1265	153	12	,	,	PUNCT
fis-1265	153	13	kluwer	kluwer	PROPN
fis-1265	153	14	academy	academy	PROPN
fis-1265	153	15	,	,	PUNCT
fis-1265	153	16	dordrecht	dordrecht	PROPN
fis-1265	153	17	(	(	PUNCT
fis-1265	153	18	2002	2002	NUM
fis-1265	153	19	)	)	PUNCT
fis-1265	153	20	.	.	PUNCT
fis-1265	154	1	[	[	X
fis-1265	154	2	2	2	NUM
fis-1265	154	3	]	]	PUNCT
fis-1265	154	4	gardner	gardner	NOUN
fis-1265	154	5	,	,	PUNCT
fis-1265	154	6	j.w	j.w	PROPN
fis-1265	154	7	.	.	PROPN
fis-1265	154	8	,	,	PUNCT
fis-1265	154	9	varadan	varadan	PROPN
fis-1265	154	10	,	,	PUNCT
fis-1265	154	11	v.k	v.k	PROPN
fis-1265	154	12	.	.	PROPN
fis-1265	154	13	,	,	PUNCT
fis-1265	154	14	awadelkarim	awadelkarim	PROPN
fis-1265	154	15	,	,	PUNCT
fis-1265	154	16	o.o	o.o	PROPN
fis-1265	154	17	.	.	PROPN
fis-1265	154	18	,	,	PUNCT
fis-1265	154	19	microsensors	microsensor	NOUN
fis-1265	154	20	mems	mem	NOUN
fis-1265	154	21	and	and	CCONJ
fis-1265	154	22	smart	smart	ADJ
fis-1265	154	23	devices	device	NOUN
fis-1265	154	24	,	,	PUNCT
fis-1265	154	25	wiley	wiley	NOUN
fis-1265	154	26	,	,	PUNCT
fis-1265	154	27	chichester	chichester	PROPN
fis-1265	154	28	(	(	PUNCT
fis-1265	154	29	2001	2001	NUM
fis-1265	154	30	)	)	PUNCT
fis-1265	154	31	.	.	PUNCT
fis-1265	155	1	[	[	X
fis-1265	155	2	3	3	NUM
fis-1265	155	3	]	]	PUNCT
fis-1265	155	4	ayazi	ayazi	NOUN
fis-1265	155	5	,	,	PUNCT
fis-1265	155	6	f.	f.	PROPN
fis-1265	155	7	,	,	PUNCT
fis-1265	155	8	multi	multi	ADJ
fis-1265	155	9	-	-	ADJ
fis-1265	155	10	dof	dof	ADJ
fis-1265	155	11	inertial	inertial	NOUN
fis-1265	155	12	mems	mem	NOUN
fis-1265	155	13	:	:	PUNCT
fis-1265	155	14	from	from	ADP
fis-1265	155	15	gaming	game	VERB
fis-1265	155	16	to	to	ADP
fis-1265	155	17	dead	dead	ADJ
fis-1265	155	18	reckoning	reckoning	NOUN
fis-1265	155	19	,	,	PUNCT
fis-1265	155	20	proc	proc	NOUN
fis-1265	155	21	.	.	PUNCT
fis-1265	156	1	16th	16th	ADJ
fis-1265	156	2	international	international	ADJ
fis-1265	156	3	solid	solid	ADJ
fis-1265	156	4	-	-	PUNCT
fis-1265	156	5	state	state	NOUN
fis-1265	156	6	sensors	sensor	NOUN
fis-1265	156	7	,	,	PUNCT
fis-1265	156	8	actuators	actuator	NOUN
fis-1265	156	9	and	and	CCONJ
fis-1265	156	10	microsystems	microsystem	NOUN
fis-1265	156	11	conference	conference	NOUN
fis-1265	156	12	,	,	PUNCT
fis-1265	156	13	transducers'11	transducers'11	PROPN
fis-1265	156	14	,	,	PUNCT
fis-1265	156	15	(	(	PUNCT
fis-1265	156	16	2011	2011	NUM
fis-1265	156	17	)	)	PUNCT
fis-1265	156	18	2805	2805	NUM
fis-1265	156	19	-	-	SYM
fis-1265	156	20	2808	2808	NUM
fis-1265	156	21	.	.	PUNCT
fis-1265	157	1	[	[	X
fis-1265	157	2	4	4	NUM
fis-1265	157	3	]	]	X
fis-1265	157	4	watanabe	watanabe	PROPN
fis-1265	157	5	,	,	PUNCT
fis-1265	157	6	y.	y.	PROPN
fis-1265	157	7	,	,	PUNCT
fis-1265	157	8	mitsui	mitsui	PROPN
fis-1265	157	9	,	,	PUNCT
fis-1265	157	10	t.	t.	PROPN
fis-1265	157	11	,	,	PUNCT
fis-1265	157	12	mineta	mineta	PROPN
fis-1265	157	13	,	,	PUNCT
fis-1265	157	14	t.	t.	PROPN
fis-1265	157	15	,	,	PUNCT
fis-1265	157	16	kobayashi	kobayashi	PROPN
fis-1265	157	17	,	,	PUNCT
fis-1265	157	18	s.	s.	PROPN
fis-1265	157	19	,	,	PUNCT
fis-1265	157	20	taniguchi	taniguchi	PROPN
fis-1265	157	21	,	,	PUNCT
fis-1265	157	22	n.	n.	NOUN
fis-1265	157	23	,	,	PUNCT
fis-1265	157	24	okada	okada	PROPN
fis-1265	157	25	,	,	PUNCT
fis-1265	157	26	k.	k.	PROPN
fis-1265	157	27	,	,	PUNCT
fis-1265	157	28	five	five	NUM
fis-1265	157	29	-	-	PUNCT
fis-1265	157	30	axis	axis	NOUN
fis-1265	157	31	motion	motion	NOUN
fis-1265	157	32	sensor	sensor	NOUN
fis-1265	157	33	with	with	ADP
fis-1265	157	34	electrostatic	electrostatic	ADJ
fis-1265	157	35	drive	drive	NOUN
fis-1265	157	36	and	and	CCONJ
fis-1265	157	37	capacitive	capacitive	ADJ
fis-1265	157	38	detection	detection	NOUN
fis-1265	157	39	fabricated	fabricate	VERB
fis-1265	157	40	by	by	ADP
fis-1265	157	41	silicon	silicon	NOUN
fis-1265	157	42	bulk	bulk	PROPN
fis-1265	157	43	micromachining	micromachining	NOUN
fis-1265	157	44	,	,	PUNCT
fis-1265	157	45	sens	sens	PROPN
fis-1265	157	46	.	.	PROPN
fis-1265	157	47	actuator	actuator	PROPN
fis-1265	157	48	a	a	PRON
fis-1265	157	49	,	,	PUNCT
fis-1265	157	50	97	97	NUM
fis-1265	157	51	-	-	SYM
fis-1265	157	52	98	98	NUM
fis-1265	157	53	(	(	PUNCT
fis-1265	157	54	2002	2002	NUM
fis-1265	157	55	)	)	PUNCT
fis-1265	157	56	109	109	NUM
fis-1265	157	57	-	-	SYM
fis-1265	157	58	115	115	NUM
fis-1265	157	59	.	.	PUNCT
fis-1265	158	1	[	[	X
fis-1265	158	2	5	5	NUM
fis-1265	158	3	]	]	X
fis-1265	158	4	xie	xie	PROPN
fis-1265	158	5	,	,	PUNCT
fis-1265	158	6	z.	z.	PROPN
fis-1265	158	7	,	,	PUNCT
fis-1265	158	8	chang	chang	PROPN
fis-1265	158	9	,	,	PUNCT
fis-1265	158	10	h.	h.	PROPN
fis-1265	158	11	,	,	PUNCT
fis-1265	158	12	yang	yang	PROPN
fis-1265	158	13	,	,	PUNCT
fis-1265	158	14	y.	y.	PROPN
fis-1265	158	15	,	,	PUNCT
fis-1265	158	16	li	li	PROPN
fis-1265	158	17	,	,	PUNCT
fis-1265	158	18	x.	x.	PROPN
fis-1265	158	19	,	,	PUNCT
fis-1265	158	20	zhou	zhou	PROPN
fis-1265	158	21	,	,	PUNCT
fis-1265	158	22	p.	p.	PROPN
fis-1265	158	23	,	,	PUNCT
fis-1265	158	24	yuan	yuan	PROPN
fis-1265	158	25	,	,	PUNCT
fis-1265	158	26	w.	w.	PROPN
fis-1265	158	27	,	,	PUNCT
fis-1265	158	28	design	design	NOUN
fis-1265	158	29	and	and	CCONJ
fis-1265	158	30	fabrication	fabrication	NOUN
fis-1265	158	31	of	of	ADP
fis-1265	158	32	a	a	DET
fis-1265	158	33	vortex	vortex	NOUN
fis-1265	158	34	inertial	inertial	NOUN
fis-1265	158	35	sensor	sensor	NOUN
fis-1265	158	36	consisting	consist	VERB
fis-1265	158	37	of	of	ADP
fis-1265	158	38	3	3	NUM
fis-1265	158	39	-	-	PUNCT
fis-1265	158	40	dof	dof	NOUN
fis-1265	158	41	gyroscope	gyroscope	NOUN
fis-1265	158	42	and	and	CCONJ
fis-1265	158	43	3	3	NUM
fis-1265	158	44	-	-	PUNCT
fis-1265	158	45	dof	dof	NOUN
fis-1265	158	46	accelerometer	accelerometer	NOUN
fis-1265	158	47	,	,	PUNCT
fis-1265	158	48	in	in	ADP
fis-1265	158	49	:	:	PUNCT
fis-1265	158	50	proc	proc	NOUN
fis-1265	158	51	.	.	PUNCT
fis-1265	159	1	of	of	ADP
fis-1265	159	2	the	the	DET
fis-1265	159	3	ieee	ieee	NOUN
fis-1265	159	4	international	international	PROPN
fis-1265	159	5	conference	conference	PROPN
fis-1265	159	6	on	on	ADP
fis-1265	159	7	micro	micro	X
fis-1265	159	8	electro	electro	VERB
fis-1265	159	9	mechanical	mechanical	ADJ
fis-1265	159	10	systems	system	NOUN
fis-1265	159	11	(	(	PUNCT
fis-1265	159	12	mems	mems	PROPN
fis-1265	159	13	)	)	PUNCT
fis-1265	159	14	,	,	PUNCT
fis-1265	159	15	(	(	PUNCT
fis-1265	159	16	2012	2012	NUM
fis-1265	159	17	)	)	PUNCT
fis-1265	159	18	551	551	NUM
fis-1265	159	19	-	-	SYM
fis-1265	159	20	554	554	NUM
fis-1265	159	21	.	.	PUNCT
fis-1265	160	1	[	[	X
fis-1265	160	2	6	6	NUM
fis-1265	160	3	]	]	X
fis-1265	160	4	corigliano	corigliano	NOUN
fis-1265	160	5	,	,	PUNCT
fis-1265	160	6	a.	a.	PROPN
fis-1265	160	7	,	,	PUNCT
fis-1265	160	8	masi	masi	PROPN
fis-1265	160	9	,	,	PUNCT
fis-1265	160	10	b.d	b.d	PROPN
fis-1265	160	11	.	.	PROPN
fis-1265	160	12	,	,	PUNCT
fis-1265	160	13	frangi	frangi	PROPN
fis-1265	160	14	,	,	PUNCT
fis-1265	160	15	a.	a.	NOUN
fis-1265	160	16	,	,	PUNCT
fis-1265	160	17	comi	comi	NOUN
fis-1265	160	18	,	,	PUNCT
fis-1265	160	19	c.	c.	PROPN
fis-1265	160	20	,	,	PUNCT
fis-1265	160	21	villa	villa	PROPN
fis-1265	160	22	,	,	PUNCT
fis-1265	160	23	a.	a.	NOUN
fis-1265	160	24	and	and	CCONJ
fis-1265	160	25	marchi	marchi	PROPN
fis-1265	160	26	,	,	PUNCT
fis-1265	160	27	m.	m.	NOUN
fis-1265	160	28	,	,	PUNCT
fis-1265	160	29	mechanical	mechanical	ADJ
fis-1265	160	30	characterization	characterization	NOUN
fis-1265	160	31	of	of	ADP
fis-1265	160	32	polysilicon	polysilicon	NOUN
fis-1265	160	33	through	through	ADP
fis-1265	160	34	on	on	ADP
fis-1265	160	35	chip	chip	NOUN
fis-1265	160	36	tensile	tensile	NOUN
fis-1265	160	37	tests	test	NOUN
fis-1265	160	38	,	,	PUNCT
fis-1265	160	39	j.	j.	PROPN
fis-1265	160	40	microelectromech	microelectromech	PROPN
fis-1265	160	41	.	.	PUNCT
fis-1265	161	1	syst	syst	PROPN
fis-1265	161	2	.	.	PROPN
fis-1265	161	3	,	,	PUNCT
fis-1265	161	4	13	13	NUM
fis-1265	161	5	(	(	PUNCT
fis-1265	161	6	2004	2004	NUM
fis-1265	161	7	)	)	PUNCT
fis-1265	161	8	200	200	NUM
fis-1265	161	9	-	-	SYM
fis-1265	161	10	219	219	NUM
fis-1265	161	11	.	.	PUNCT
fis-1265	162	1	[	[	X
fis-1265	162	2	7	7	NUM
fis-1265	162	3	]	]	X
fis-1265	162	4	zhu	zhu	PROPN
fis-1265	162	5	,	,	PUNCT
fis-1265	162	6	r.	r.	PROPN
fis-1265	162	7	,	,	PUNCT
fis-1265	162	8	zhang	zhang	PROPN
fis-1265	162	9	,	,	PUNCT
fis-1265	162	10	g.	g.	PROPN
fis-1265	162	11	,	,	PUNCT
fis-1265	162	12	chen	chen	PROPN
fis-1265	162	13	,	,	PUNCT
fis-1265	162	14	g.	g.	PROPN
fis-1265	162	15	,	,	PUNCT
fis-1265	162	16	a	a	DET
fis-1265	162	17	novel	novel	ADJ
fis-1265	162	18	resonant	resonant	NOUN
fis-1265	162	19	accelerometer	accelerometer	NOUN
fis-1265	162	20	based	base	VERB
fis-1265	162	21	on	on	ADP
fis-1265	162	22	nanoelectromechanical	nanoelectromechanical	ADJ
fis-1265	162	23	oscillator	oscillator	NOUN
fis-1265	162	24	,	,	PUNCT
fis-1265	162	25	in	in	ADP
fis-1265	162	26	:	:	PUNCT
fis-1265	162	27	proc	proc	NOUN
fis-1265	162	28	.	.	PUNCT
fis-1265	162	29	mems	mems	PROPN
fis-1265	162	30	2010	2010	NUM
fis-1265	162	31	,	,	PUNCT
fis-1265	162	32	hong	hong	PROPN
fis-1265	162	33	kong	kong	PROPN
fis-1265	162	34	,	,	PUNCT
fis-1265	162	35	(	(	PUNCT
fis-1265	162	36	2010	2010	NUM
fis-1265	162	37	)	)	PUNCT
fis-1265	162	38	440	440	NUM
fis-1265	162	39	-	-	SYM
fis-1265	162	40	443	443	NUM
fis-1265	162	41	.	.	PUNCT
fis-1265	163	1	[	[	X
fis-1265	163	2	8	8	NUM
fis-1265	163	3	]	]	SYM
fis-1265	163	4	comi	comi	NOUN
fis-1265	163	5	,	,	PUNCT
fis-1265	163	6	c.	c.	NOUN
fis-1265	163	7	,	,	PUNCT
fis-1265	163	8	corigliano	corigliano	NOUN
fis-1265	163	9	,	,	PUNCT
fis-1265	163	10	a.	a.	NOUN
fis-1265	163	11	,	,	PUNCT
fis-1265	163	12	langfelder	langfelder	NOUN
fis-1265	163	13	,	,	PUNCT
fis-1265	163	14	g.	g.	PROPN
fis-1265	163	15	,	,	PUNCT
fis-1265	163	16	longoni	longoni	PROPN
fis-1265	163	17	,	,	PUNCT
fis-1265	163	18	a.	a.	PROPN
fis-1265	163	19	,	,	PUNCT
fis-1265	163	20	tocchio	tocchio	INTJ
fis-1265	163	21	,	,	PUNCT
fis-1265	163	22	a.	a.	NOUN
fis-1265	163	23	,	,	PUNCT
fis-1265	163	24	simoni	simoni	PROPN
fis-1265	163	25	,	,	PUNCT
fis-1265	163	26	b.	b.	PROPN
fis-1265	163	27	,	,	PUNCT
fis-1265	163	28	a	a	DET
fis-1265	163	29	resonant	resonant	ADJ
fis-1265	163	30	micro	micro	NOUN
fis-1265	163	31	-	-	NOUN
fis-1265	163	32	accelerometer	accelerometer	NOUN
fis-1265	163	33	with	with	ADP
fis-1265	163	34	high	high	ADJ
fis-1265	163	35	sensitivity	sensitivity	NOUN
fis-1265	163	36	operating	operate	VERB
fis-1265	163	37	in	in	ADP
fis-1265	163	38	an	an	DET
fis-1265	163	39	oscillating	oscillate	VERB
fis-1265	163	40	circuit	circuit	NOUN
fis-1265	163	41	,	,	PUNCT
fis-1265	163	42	j.	j.	PROPN
fis-1265	163	43	microelectromech	microelectromech	PROPN
fis-1265	163	44	.	.	PUNCT
fis-1265	164	1	syst	syst	PROPN
fis-1265	164	2	.	.	PROPN
fis-1265	164	3	,	,	PUNCT
fis-1265	164	4	19	19	NUM
fis-1265	164	5	(	(	PUNCT
fis-1265	164	6	2010	2010	NUM
fis-1265	164	7	)	)	PUNCT
fis-1265	164	8	1140	1140	NUM
fis-1265	164	9	–	–	PUNCT
fis-1265	164	10	1152	1152	NUM
fis-1265	164	11	.	.	PUNCT
fis-1265	165	1	[	[	X
fis-1265	165	2	9	9	NUM
fis-1265	165	3	]	]	X
fis-1265	165	4	kim	kim	PROPN
fis-1265	165	5	,	,	PUNCT
fis-1265	165	6	h.c	h.c	PROPN
fis-1265	165	7	.	.	PROPN
fis-1265	165	8	,	,	PUNCT
fis-1265	165	9	seok	seok	PROPN
fis-1265	165	10	,	,	PUNCT
fis-1265	165	11	s.	s.	PROPN
fis-1265	165	12	,	,	PUNCT
fis-1265	165	13	kim	kim	PROPN
fis-1265	165	14	,	,	PUNCT
fis-1265	165	15	i.	i.	PROPN
fis-1265	165	16	,	,	PUNCT
fis-1265	165	17	choi	choi	NOUN
fis-1265	165	18	,	,	PUNCT
fis-1265	165	19	s	s	PROPN
fis-1265	165	20	-	-	PUNCT
fis-1265	165	21	d.	d.	PROPN
fis-1265	165	22	,	,	PUNCT
fis-1265	165	23	chun	chun	PROPN
fis-1265	165	24	,	,	PUNCT
fis-1265	165	25	k.	k.	PROPN
fis-1265	165	26	,	,	PUNCT
fis-1265	165	27	inertial	inertial	NOUN
fis-1265	165	28	-	-	PUNCT
fis-1265	165	29	grade	grade	NOUN
fis-1265	165	30	out	out	ADP
fis-1265	165	31	-	-	PUNCT
fis-1265	165	32	of	of	ADP
fis-1265	165	33	-	-	PUNCT
fis-1265	165	34	plane	plane	NOUN
fis-1265	165	35	and	and	CCONJ
fis-1265	165	36	in	in	ADP
fis-1265	165	37	-	-	PUNCT
fis-1265	165	38	plane	plane	NOUN
fis-1265	165	39	differential	differential	NOUN
fis-1265	165	40	resonant	resonant	NOUN
fis-1265	165	41	silicon	silicon	NOUN
fis-1265	165	42	accelerometers	accelerometer	NOUN
fis-1265	165	43	(	(	PUNCT
fis-1265	165	44	drxls	drxls	ADV
fis-1265	165	45	)	)	PUNCT
fis-1265	165	46	,	,	PUNCT
fis-1265	165	47	in	in	ADP
fis-1265	165	48	:	:	PUNCT
fis-1265	165	49	proc	proc	NOUN
fis-1265	165	50	.	.	PUNCT
fis-1265	165	51	transducers05	transducers05	PROPN
fis-1265	165	52	,	,	PUNCT
fis-1265	165	53	seoul	seoul	PROPN
fis-1265	165	54	,	,	PUNCT
fis-1265	165	55	(	(	PUNCT
fis-1265	165	56	2005	2005	NUM
fis-1265	165	57	)	)	PUNCT
fis-1265	165	58	172	172	NUM
fis-1265	165	59	-	-	SYM
fis-1265	165	60	175	175	NUM
fis-1265	165	61	.	.	PUNCT
fis-1265	166	1	[	[	X
fis-1265	166	2	10	10	NUM
fis-1265	166	3	]	]	SYM
fis-1265	166	4	comi	comi	NOUN
fis-1265	166	5	,	,	PUNCT
fis-1265	166	6	c.	c.	NOUN
fis-1265	166	7	,	,	PUNCT
fis-1265	166	8	corigliano	corigliano	NOUN
fis-1265	166	9	,	,	PUNCT
fis-1265	166	10	a.	a.	NOUN
fis-1265	166	11	,	,	PUNCT
fis-1265	166	12	ghisi	ghisi	VERB
fis-1265	166	13	,	,	PUNCT
fis-1265	166	14	a.	a.	NOUN
fis-1265	166	15	,	,	PUNCT
fis-1265	166	16	zerbini	zerbini	PROPN
fis-1265	166	17	,	,	PUNCT
fis-1265	166	18	s.	s.	PROPN
fis-1265	166	19	,	,	PUNCT
fis-1265	166	20	a	a	DET
fis-1265	166	21	resonant	resonant	ADJ
fis-1265	166	22	micro	micro	NOUN
fis-1265	166	23	accelerometer	accelerometer	NOUN
fis-1265	166	24	based	base	VERB
fis-1265	166	25	on	on	ADP
fis-1265	166	26	electrostatic	electrostatic	ADJ
fis-1265	166	27	stiffness	stiffness	NOUN
fis-1265	166	28	variation	variation	NOUN
fis-1265	166	29	,	,	PUNCT
fis-1265	166	30	meccanica	meccanica	PROPN
fis-1265	166	31	,	,	PUNCT
fis-1265	166	32	48	48	NUM
fis-1265	166	33	(	(	PUNCT
fis-1265	166	34	2013	2013	NUM
fis-1265	166	35	)	)	PUNCT
fis-1265	166	36	1893–1900	1893–1900	NUM
fis-1265	166	37	.	.	PUNCT
fis-1265	167	1	[	[	X
fis-1265	167	2	11	11	NUM
fis-1265	167	3	]	]	X
fis-1265	167	4	seshia	seshia	PROPN
fis-1265	167	5	,	,	PUNCT
fis-1265	167	6	a.a	a.a	PROPN
fis-1265	167	7	.	.	PROPN
fis-1265	167	8	,	,	PUNCT
fis-1265	167	9	howe	howe	PROPN
fis-1265	167	10	,	,	PUNCT
fis-1265	167	11	r.t	r.t	PROPN
fis-1265	167	12	.	.	PROPN
fis-1265	167	13	,	,	PUNCT
fis-1265	167	14	montague	montague	PROPN
fis-1265	167	15	,	,	PUNCT
fis-1265	167	16	s.	s.	PROPN
fis-1265	167	17	,	,	PUNCT
fis-1265	167	18	an	an	DET
fis-1265	167	19	integrated	integrate	VERB
fis-1265	167	20	microelectromechanical	microelectromechanical	ADJ
fis-1265	167	21	resonant	resonant	ADJ
fis-1265	167	22	output	output	NOUN
fis-1265	167	23	gyroscope	gyroscope	NOUN
fis-1265	167	24	,	,	PUNCT
fis-1265	167	25	in	in	ADP
fis-1265	167	26	:	:	PUNCT
fis-1265	167	27	proc	proc	NOUN
fis-1265	167	28	.	.	PUNCT
fis-1265	168	1	mems2002	mems2002	PROPN
fis-1265	168	2	,	,	PUNCT
fis-1265	168	3	(	(	PUNCT
fis-1265	168	4	2002	2002	NUM
fis-1265	168	5	)	)	PUNCT
fis-1265	168	6	722	722	NUM
fis-1265	168	7	-	-	SYM
fis-1265	168	8	726	726	NUM
fis-1265	168	9	.	.	PUNCT
fis-1265	169	1	[	[	X
fis-1265	169	2	12	12	NUM
fis-1265	169	3	]	]	X
fis-1265	169	4	li	li	PROPN
fis-1265	169	5	,	,	PUNCT
fis-1265	169	6	j.	j.	PROPN
fis-1265	169	7	,	,	PUNCT
fis-1265	169	8	fang	fang	PROPN
fis-1265	169	9	,	,	PUNCT
fis-1265	169	10	j.	j.	PROPN
fis-1265	169	11	,	,	PUNCT
fis-1265	169	12	dong	dong	PROPN
fis-1265	169	13	,	,	PUNCT
fis-1265	169	14	h.	h.	PROPN
fis-1265	169	15	,	,	PUNCT
fis-1265	169	16	tao	tao	PROPN
fis-1265	169	17	,	,	PUNCT
fis-1265	169	18	y.	y.	NOUN
fis-1265	169	19	,	,	PUNCT
fis-1265	169	20	structure	structure	NOUN
fis-1265	169	21	design	design	NOUN
fis-1265	169	22	and	and	CCONJ
fis-1265	169	23	fabrication	fabrication	NOUN
fis-1265	169	24	of	of	ADP
fis-1265	169	25	a	a	DET
fis-1265	169	26	novel	novel	ADJ
fis-1265	169	27	dual	dual	ADJ
fis-1265	169	28	-	-	PUNCT
fis-1265	169	29	mass	mass	NOUN
fis-1265	169	30	resonant	resonant	ADJ
fis-1265	169	31	output	output	NOUN
fis-1265	169	32	micromechanical	micromechanical	ADJ
fis-1265	169	33	gyroscope	gyroscope	NOUN
fis-1265	169	34	,	,	PUNCT
fis-1265	169	35	microsyst	microsyst	NOUN
fis-1265	169	36	.	.	PUNCT
fis-1265	170	1	technology	technology	NOUN
fis-1265	170	2	,	,	PUNCT
fis-1265	170	3	16	16	NUM
fis-1265	170	4	,	,	PUNCT
fis-1265	170	5	4	4	NUM
fis-1265	170	6	(	(	PUNCT
fis-1265	170	7	2010	2010	NUM
fis-1265	170	8	)	)	PUNCT
fis-1265	170	9	543552	543552	NUM
fis-1265	170	10	.	.	PUNCT
fis-1265	171	1	[	[	X
fis-1265	171	2	13	13	NUM
fis-1265	171	3	]	]	SYM
fis-1265	171	4	comi	comi	NOUN
fis-1265	171	5	,	,	PUNCT
fis-1265	171	6	c.	c.	PROPN
fis-1265	171	7	,	,	PUNCT
fis-1265	171	8	on	on	ADP
fis-1265	171	9	geometrical	geometrical	ADJ
fis-1265	171	10	effects	effect	NOUN
fis-1265	171	11	in	in	ADP
fis-1265	171	12	micro	micro	NOUN
fis-1265	171	13	-	-	NOUN
fis-1265	171	14	resonators	resonator	NOUN
fis-1265	171	15	,	,	PUNCT
fis-1265	171	16	latin	latin	ADJ
fis-1265	171	17	american	american	PROPN
fis-1265	171	18	j.	j.	PROPN
fis-1265	171	19	solid	solid	PROPN
fis-1265	171	20	and	and	CCONJ
fis-1265	171	21	structures	structure	NOUN
fis-1265	171	22	,	,	PUNCT
fis-1265	171	23	6	6	NUM
fis-1265	171	24	(	(	PUNCT
fis-1265	171	25	2009	2009	NUM
fis-1265	171	26	)	)	PUNCT
fis-1265	171	27	73	73	NUM
fis-1265	171	28	-	-	SYM
fis-1265	171	29	87	87	NUM
fis-1265	171	30	.	.	PUNCT
fis-1265	172	1	[	[	X
fis-1265	172	2	14	14	NUM
fis-1265	172	3	]	]	X
fis-1265	172	4	ferrari	ferrari	X
fis-1265	172	5	,	,	PUNCT
fis-1265	172	6	v.	v.	PROPN
fis-1265	172	7	,	,	PUNCT
fis-1265	172	8	ghisla	ghisla	PROPN
fis-1265	172	9	,	,	PUNCT
fis-1265	172	10	a.	a.	PROPN
fis-1265	172	11	,	,	PUNCT
fis-1265	172	12	marioli	marioli	PROPN
fis-1265	172	13	,	,	PUNCT
fis-1265	172	14	d.	d.	PROPN
fis-1265	172	15	,	,	PUNCT
fis-1265	172	16	taroni	taroni	PROPN
fis-1265	172	17	,	,	PUNCT
fis-1265	172	18	a.	a.	NOUN
fis-1265	172	19	,	,	PUNCT
fis-1265	172	20	silicon	silicon	NOUN
fis-1265	172	21	resonant	resonant	NOUN
fis-1265	172	22	accelerometer	accelerometer	NOUN
fis-1265	172	23	with	with	ADP
fis-1265	172	24	electronic	electronic	ADJ
fis-1265	172	25	compensation	compensation	NOUN
fis-1265	172	26	of	of	ADP
fis-1265	172	27	inputoutput	inputoutput	NOUN
fis-1265	172	28	cross	cross	NOUN
fis-1265	172	29	-	-	ADJ
fis-1265	172	30	talk	talk	ADJ
fis-1265	172	31	,	,	PUNCT
fis-1265	172	32	sens	sens	PROPN
fis-1265	172	33	.	.	PROPN
fis-1265	172	34	actuator	actuator	PROPN
fis-1265	172	35	a	a	PRON
fis-1265	172	36	,	,	PUNCT
fis-1265	172	37	phys	phy	NOUN
fis-1265	172	38	.	.	PUNCT
fis-1265	172	39	,	,	PUNCT
fis-1265	172	40	123	123	NUM
fis-1265	172	41	-	-	SYM
fis-1265	172	42	124	124	NUM
fis-1265	172	43	(	(	PUNCT
fis-1265	172	44	2005	2005	NUM
fis-1265	172	45	)	)	PUNCT
fis-1265	172	46	258	258	NUM
fis-1265	172	47	-	-	SYM
fis-1265	172	48	266	266	NUM
fis-1265	172	49	.	.	PUNCT
fis-1265	173	1	[	[	X
fis-1265	173	2	15	15	NUM
fis-1265	173	3	]	]	X
fis-1265	173	4	stokey	stokey	PROPN
fis-1265	173	5	,	,	PUNCT
fis-1265	173	6	w.	w.	PROPN
fis-1265	173	7	,	,	PUNCT
fis-1265	173	8	vibration	vibration	NOUN
fis-1265	173	9	of	of	ADP
fis-1265	173	10	systems	system	NOUN
fis-1265	173	11	having	having	AUX
fis-1265	173	12	distributed	distribute	VERB
fis-1265	173	13	mass	mass	NOUN
fis-1265	173	14	and	and	CCONJ
fis-1265	173	15	elasticity	elasticity	NOUN
fis-1265	173	16	.	.	PUNCT
fis-1265	174	1	shock	shock	NOUN
fis-1265	174	2	and	and	CCONJ
fis-1265	174	3	vibration	vibration	NOUN
fis-1265	174	4	handbook	handbook	NOUN
fis-1265	174	5	,	,	PUNCT
fis-1265	174	6	c.	c.	PROPN
fis-1265	174	7	harris	harris	PROPN
fis-1265	174	8	,	,	PUNCT
fis-1265	174	9	ed	ed	PROPN
fis-1265	174	10	.	.	PUNCT
fis-1265	175	1	new	new	PROPN
fis-1265	175	2	york	york	PROPN
fis-1265	175	3	:	:	PUNCT
fis-1265	175	4	mcgrawhill	mcgrawhill	PROPN
fis-1265	175	5	,	,	PUNCT
fis-1265	175	6	1988	1988	NUM
fis-1265	175	7	.	.	PUNCT
fis-1265	176	1	[	[	X
fis-1265	176	2	16	16	NUM
fis-1265	176	3	]	]	X
fis-1265	176	4	bokaian	bokaian	PROPN
fis-1265	176	5	,	,	PUNCT
fis-1265	176	6	a.	a.	NOUN
fis-1265	176	7	,	,	PUNCT
fis-1265	176	8	natural	natural	ADJ
fis-1265	176	9	frequencies	frequency	NOUN
fis-1265	176	10	of	of	ADP
fis-1265	176	11	beams	beam	NOUN
fis-1265	176	12	under	under	ADP
fis-1265	176	13	tensile	tensile	NOUN
fis-1265	176	14	axial	axial	ADJ
fis-1265	176	15	load	load	NOUN
fis-1265	176	16	,	,	PUNCT
fis-1265	176	17	j.sound	j.sound	ADV
fis-1265	176	18	vib	vib	PROPN
fis-1265	176	19	.	.	PROPN
fis-1265	176	20	,	,	PUNCT
fis-1265	176	21	142	142	NUM
fis-1265	176	22	(	(	PUNCT
fis-1265	176	23	1990	1990	NUM
fis-1265	176	24	)	)	PUNCT
fis-1265	176	25	481–498	481–498	NUM
fis-1265	176	26	.	.	PUNCT
fis-1265	177	1	[	[	X
fis-1265	177	2	17	17	NUM
fis-1265	177	3	]	]	PUNCT
fis-1265	177	4	tocchio	tocchio	PROPN
fis-1265	177	5	,	,	PUNCT
fis-1265	177	6	a.	a.	NOUN
fis-1265	177	7	,	,	PUNCT
fis-1265	177	8	comi	comi	NOUN
fis-1265	177	9	,	,	PUNCT
fis-1265	177	10	c.	c.	NOUN
fis-1265	177	11	,	,	PUNCT
fis-1265	177	12	langfelder	langfelder	PROPN
fis-1265	177	13	,	,	PUNCT
fis-1265	177	14	g.	g.	PROPN
fis-1265	177	15	,	,	PUNCT
fis-1265	177	16	corigliano	corigliano	PROPN
fis-1265	177	17	,	,	PUNCT
fis-1265	177	18	a.	a.	NOUN
fis-1265	177	19	,	,	PUNCT
fis-1265	177	20	longoni	longoni	ADJ
fis-1265	177	21	a.	a.	NOUN
fis-1265	177	22	,	,	PUNCT
fis-1265	177	23	enhancing	enhance	VERB
fis-1265	177	24	the	the	DET
fis-1265	177	25	linear	linear	ADJ
fis-1265	177	26	range	range	NOUN
fis-1265	177	27	of	of	ADP
fis-1265	177	28	mems	mem	NOUN
fis-1265	177	29	resonators	resonator	NOUN
fis-1265	177	30	for	for	ADP
fis-1265	177	31	sensing	sense	VERB
fis-1265	177	32	applications	application	NOUN
fis-1265	177	33	,	,	PUNCT
fis-1265	177	34	ieee	ieee	NOUN
fis-1265	177	35	sensors	sensor	NOUN
fis-1265	177	36	journal	journal	NOUN
fis-1265	177	37	,	,	PUNCT
fis-1265	177	38	11(12	11(12	NUM
fis-1265	177	39	)	)	PUNCT
fis-1265	177	40	(	(	PUNCT
fis-1265	177	41	2011	2011	NUM
fis-1265	177	42	)	)	PUNCT
fis-1265	177	43	3202	3202	NUM
fis-1265	177	44	-	-	PUNCT
fis-1265	177	45	3210	3210	NUM
fis-1265	177	46	.	.	PUNCT
fis-1265	178	1	[	[	X
fis-1265	178	2	18	18	NUM
fis-1265	178	3	]	]	PUNCT
fis-1265	178	4	caspani	caspani	PROPN
fis-1265	178	5	,	,	PUNCT
fis-1265	178	6	a.	a.	NOUN
fis-1265	178	7	,	,	PUNCT
fis-1265	178	8	comi	comi	NOUN
fis-1265	178	9	,	,	PUNCT
fis-1265	178	10	c.	c.	NOUN
fis-1265	178	11	,	,	PUNCT
fis-1265	178	12	corigliano	corigliano	NOUN
fis-1265	178	13	,	,	PUNCT
fis-1265	178	14	a.	a.	NOUN
fis-1265	178	15	,	,	PUNCT
fis-1265	178	16	langfelder	langfelder	NOUN
fis-1265	178	17	,	,	PUNCT
fis-1265	178	18	g.	g.	PROPN
fis-1265	178	19	,	,	PUNCT
fis-1265	178	20	zega	zega	PROPN
fis-1265	178	21	,	,	PUNCT
fis-1265	178	22	v.	v.	ADV
fis-1265	178	23	,	,	PUNCT
fis-1265	178	24	zerbini	zerbini	PROPN
fis-1265	178	25	,	,	PUNCT
fis-1265	178	26	s.	s.	PROPN
fis-1265	178	27	,	,	PUNCT
fis-1265	178	28	dynamic	dynamic	ADJ
fis-1265	178	29	non	non	ADJ
fis-1265	178	30	-	-	ADJ
fis-1265	178	31	linear	linear	ADJ
fis-1265	178	32	behaviour	behaviour	NOUN
fis-1265	178	33	of	of	ADP
fis-1265	178	34	torsional	torsional	ADJ
fis-1265	178	35	resonators	resonator	NOUN
fis-1265	178	36	in	in	ADP
fis-1265	178	37	mems	mem	NOUN
fis-1265	178	38	,	,	PUNCT
fis-1265	178	39	in	in	ADP
fis-1265	178	40	preparation	preparation	NOUN
fis-1265	178	41	.	.	PUNCT
fis-1265	179	1	i	i	PRON