id	sid	eid	entity	type
fbem-18893	1	1	2766-824x	QUANTITY
fbem-18893	2	1	14	DATE
fbem-18893	2	2	1	CARDINAL
fbem-18893	2	3	2024	CARDINAL
fbem-18893	2	4	204	CARDINAL
fbem-18893	2	5	shian	NORP
fbem-18893	2	6	xu	PERSON
fbem-18893	3	1	shenzhen	GPE
fbem-18893	3	2	jizhi laser co.	ORG
fbem-18893	3	3	shenzhen	GPE
fbem-18893	3	4	guangdong	GPE
fbem-18893	3	5	518000	DATE
fbem-18893	3	6	china	GPE
fbem-18893	4	1	three	CARDINAL
fbem-18893	5	1	china	GPE
fbem-18893	8	1	first	ORDINAL
fbem-18893	10	1	1.	CARDINAL
fbem-18893	10	2	recent years	DATE
fbem-18893	10	3	1	CARDINAL
fbem-18893	10	4	germany	GPE
fbem-18893	10	5	4.0	CARDINAL
fbem-18893	10	6	the united states'	GPE
fbem-18893	10	7	china	GPE
fbem-18893	10	8	china	GPE
fbem-18893	10	9	2025	DATE
fbem-18893	11	1	23	CARDINAL
fbem-18893	12	1	4	CARDINAL
fbem-18893	14	1	5	CARDINAL
fbem-18893	15	1	china	GPE
fbem-18893	15	2	china	GPE
fbem-18893	15	3	2025	DATE
fbem-18893	16	1	china	GPE
fbem-18893	18	1	2	CARDINAL
fbem-18893	20	1	the early 1960s	DATE
fbem-18893	20	2	first	ORDINAL
fbem-18893	20	3	more than 50 years	DATE
fbem-18893	21	1	6	CARDINAL
fbem-18893	22	1	1	CARDINAL
fbem-18893	22	2	five	CARDINAL
fbem-18893	23	1	205	CARDINAL
fbem-18893	23	2	1	CARDINAL
fbem-18893	23	3	five	CARDINAL
fbem-18893	23	4	3	CARDINAL
fbem-18893	23	5	3.1	CARDINAL
fbem-18893	23	6	3	CARDINAL
fbem-18893	23	7	6	CARDINAL
fbem-18893	24	1	3	CARDINAL
fbem-18893	25	1	six	CARDINAL
fbem-18893	25	2	2	CARDINAL
fbem-18893	25	3	3.2	CARDINAL
fbem-18893	26	1	three	CARDINAL
fbem-18893	27	1	three	CARDINAL
fbem-18893	30	1	four	CARDINAL
fbem-18893	30	2	ac servo motor	ORG
fbem-18893	30	3	linear motor	ORG
fbem-18893	31	1	3.3	CARDINAL
fbem-18893	32	1	206	CARDINAL
fbem-18893	34	1	3.4	CARDINAL
fbem-18893	34	2	four	CARDINAL
fbem-18893	34	3	22%	PERCENT
fbem-18893	34	4	24%	PERCENT
fbem-18893	34	5	36%	PERCENT
fbem-18893	34	6	12%.[8	DATE
fbem-18893	35	1	three	CARDINAL
fbem-18893	35	2	ac/dc servo motor	ORG
fbem-18893	36	1	3.5	CARDINAL
fbem-18893	37	1	ros	ORG
fbem-18893	38	1	ros	PERSON
fbem-18893	39	1	3	CARDINAL
fbem-18893	40	1	3.6	CARDINAL
fbem-18893	44	1	4	CARDINAL
fbem-18893	44	2	4	CARDINAL
fbem-18893	45	1	one	CARDINAL
fbem-18893	50	1	207	CARDINAL
fbem-18893	51	1	4.1	CARDINAL
fbem-18893	57	1	3d	CARDINAL
fbem-18893	60	1	5	CARDINAL
fbem-18893	61	1	4.2	CARDINAL
fbem-18893	65	1	4.3	CARDINAL
fbem-18893	67	1	daily	DATE
fbem-18893	69	1	4.4	CARDINAL
fbem-18893	76	1	5	CARDINAL
fbem-18893	78	1	1	CARDINAL
fbem-18893	78	2	indri m	PERSON
fbem-18893	78	3	bello l l	ORG
fbem-18893	79	1	ieee industrial electronics magazine	ORG
fbem-18893	79	2	2020	DATE
fbem-18893	79	3	15(1	DATE
fbem-18893	79	4	50-61	CARDINAL
fbem-18893	80	1	2	CARDINAL
fbem-18893	80	2	gao l	ORG
fbem-18893	80	3	li p	PERSON
fbem-18893	81	1	2019,5(4):619	CARDINAL
fbem-18893	81	2	208	CARDINAL
fbem-18893	82	1	3	CARDINAL
fbem-18893	82	2	ghasemi m	ORG
fbem-18893	82	3	khorshidi k. design	PERSON
fbem-18893	83	1	2021	CARDINAL
fbem-18893	83	2	44	DATE
fbem-18893	83	3	101268	DATE
fbem-18893	84	1	4	CARDINAL
fbem-18893	84	2	tan jianrong	PERSON
fbem-18893	84	3	liu daxin	PERSON
fbem-18893	84	4	liu zhenyu	PERSON
fbem-18893	86	1	2017	DATE
fbem-18893	86	2	19	DATE
fbem-18893	86	3	3):39-44	DATE
fbem-18893	87	1	5	CARDINAL
fbem-18893	87	2	tan jianrong	PERSON
fbem-18893	89	1	2017(3):18	CARDINAL
fbem-18893	90	1	6	CARDINAL
fbem-18893	90	2	deng zhidong	PERSON
fbem-18893	91	1	fourth	ORDINAL
fbem-18893	93	1	2016(4):12	CARDINAL
fbem-18893	94	1	7] day	DATE
fbem-18893	95	1	2018,4	CARDINAL
fbem-18893	95	2	4	CARDINAL
fbem-18893	96	1	440	CARDINAL
fbem-18893	97	1	8	CARDINAL
fbem-18893	97	2	wang l	PERSON
fbem-18893	97	3	liu s	PERSON
fbem-18893	97	4	5th	ORDINAL
fbem-18893	97	5	4.0	CARDINAL
fbem-18893	97	6	2020	DATE
fbem-18893	98	1	2020	DATE
fbem-18893	98	2	15-58	CARDINAL
fbem-18893	99	1	9	CARDINAL
fbem-18893	101	1	2020	DATE
fbem-18893	101	2	10(8	DATE
fbem-18893	101	3	2862	DATE
fbem-18893	102	1	10	CARDINAL
fbem-18893	103	1	geospatial big data management	ORG
fbem-18893	104	1	isprs international journal	ORG
fbem-18893	104	2	geo-information	ORG
fbem-18893	104	3	2022	CARDINAL
fbem-18893	104	4	11(5	CARDINAL
fbem-18893	104	5	277	CARDINAL