id	sid	eid	entity	type
fbem-21	1	1	2766-824x	QUANTITY
fbem-21	2	1	1	CARDINAL
fbem-21	2	2	3	CARDINAL
fbem-21	2	3	2021 1	DATE
fbem-21	2	4	jing qiu1	PERSON
fbem-21	2	5	siyi liu3	PERSON
fbem-21	3	1	1school	CARDINAL
fbem-21	3	2	sichuan university of science & engineering	ORG
fbem-21	3	3	sichuan	GPE
fbem-21	3	4	644000	DATE
fbem-21	4	1	china	GPE
fbem-21	4	2	2sichuan	GPE
fbem-21	4	3	sichuan	GPE
fbem-21	4	4	644000	DATE
fbem-21	4	5	china 3school of aerospace	ORG
fbem-21	4	6	the university of sydney	ORG
fbem-21	4	7	sydney 2006	GPE
fbem-21	4	8	aqiujingsichuan@163.com	ORG
fbem-21	4	9	bxuyunzigong@163.com	ORG
fbem-21	6	1	29	CARDINAL
fbem-21	7	1	two	CARDINAL
fbem-21	7	2	one	CARDINAL
fbem-21	7	3	one	CARDINAL
fbem-21	7	4	first	ORDINAL
fbem-21	13	1	2	CARDINAL
fbem-21	18	1	98.85%	PERCENT
fbem-21	18	2	one	CARDINAL
fbem-21	20	1	1	CARDINAL
fbem-21	21	1	1	CARDINAL
fbem-21	34	1	2	CARDINAL
fbem-21	34	2	2.1	CARDINAL
fbem-21	35	1	1	CARDINAL
fbem-21	39	1	0.2mm	QUANTITY
fbem-21	40	1	basler	ORG
fbem-21	40	2	germany	GPE
fbem-21	41	1	two	CARDINAL
fbem-21	41	2	one	CARDINAL
fbem-21	41	3	one	CARDINAL
fbem-21	42	1	1	CARDINAL
fbem-21	42	2	2 2.2	CARDINAL
fbem-21	48	1	2	CARDINAL
fbem-21	49	1	two	CARDINAL
fbem-21	49	2	2	CARDINAL
fbem-21	50	1	x'sinθ y'cosθ + y0	ORG
fbem-21	50	2	1	CARDINAL
fbem-21	50	3	two	CARDINAL
fbem-21	51	1	two	CARDINAL
fbem-21	51	2	1	CARDINAL
fbem-21	53	1	cosθ	ORG
fbem-21	53	2	1	CARDINAL
fbem-21	53	3	sinθ	PERSON
fbem-21	53	4	cosθ	ORG
fbem-21	53	5	2	CARDINAL
fbem-21	53	6	two	CARDINAL
fbem-21	53	7	two	CARDINAL
fbem-21	54	1	θ	ORG
fbem-21	54	2	zero degrees	QUANTITY
fbem-21	54	3	3	CARDINAL
fbem-21	54	4	4	CARDINAL
fbem-21	55	1	4	CARDINAL
fbem-21	55	2	25mm	QUANTITY
fbem-21	57	1	1651.88	CARDINAL
fbem-21	57	2	3	CARDINAL
fbem-21	57	3	3	CARDINAL
fbem-21	57	4	3	CARDINAL
fbem-21	62	1	1	CARDINAL
fbem-21	62	2	0	CARDINAL
fbem-21	66	1	4	CARDINAL
fbem-21	67	1	image1	ORG
fbem-21	68	1	30000,100	CARDINAL
fbem-21	69	1	9000000	CARDINAL
fbem-21	69	2	area_center	PERSON
fbem-21	69	3	row1	GPE
fbem-21	69	4	column1	GPE
fbem-21	69	5	length1	PERSON
fbem-21	69	6	length2	PERSON
fbem-21	69	7	4	CARDINAL
fbem-21	71	1	3 4	DATE
fbem-21	71	2	4.1	CARDINAL
fbem-21	76	1	≈	CARDINAL
fbem-21	76	2	4 ≈0.78	TIME
fbem-21	76	3	5	CARDINAL
fbem-21	76	4	𝑆	ORG
fbem-21	78	1	0.9	CARDINAL
fbem-21	80	1	section 3	LAW
fbem-21	85	1	5	CARDINAL
fbem-21	85	2	5	CARDINAL
fbem-21	85	3	4.2	CARDINAL
fbem-21	87	1	one	CARDINAL
fbem-21	88	1	1	CARDINAL
fbem-21	89	1	2	CARDINAL
fbem-21	89	2	one	CARDINAL
fbem-21	90	1	gen_measure_ectangle2“is	PRODUCT
fbem-21	91	1	9	CARDINAL
fbem-21	92	1	section 3	DATE
fbem-21	93	1	first	ORDINAL
fbem-21	93	2	7	CARDINAL
fbem-21	97	1	6	CARDINAL
fbem-21	98	1	eighth	ORDINAL
fbem-21	101	1	three	CARDINAL
fbem-21	102	1	6	CARDINAL
fbem-21	105	1	16	CARDINAL
fbem-21	107	1	linear	ORG
fbem-21	107	2	two	CARDINAL
fbem-21	107	3	4	CARDINAL
fbem-21	110	1	gen_measure_rectangle2	ORG
fbem-21	113	1	7	CARDINAL
fbem-21	115	1	gen_measure_rectangle2 (row	ORG
fbem-21	115	2	length1	PERSON
fbem-21	115	3	5	DATE
fbem-21	115	4	40	DATE
fbem-21	115	5	rowedge	ORG
fbem-21	115	6	columnedge	PERSON
fbem-21	116	1	gen_measure_rectangle2 (row	ORG
fbem-21	116	2	phi+rad(90	GPE
fbem-21	116	3	length1	ORG
fbem-21	116	4	20	DATE
fbem-21	116	5	5	DATE
fbem-21	116	6	40	DATE
fbem-21	116	7	rowedge	ORG
fbem-21	116	8	columnedge	PERSON
fbem-21	116	9	7	CARDINAL
fbem-21	116	10	4.3	CARDINAL
fbem-21	118	1	rgb	ORG
fbem-21	118	2	hsv	ORG
fbem-21	120	1	three	CARDINAL
fbem-21	121	1	one	CARDINAL
fbem-21	123	1	w i=1 mn	PERSON
fbem-21	123	2	6	CARDINAL
fbem-21	124	1	three	CARDINAL
fbem-21	125	1	3	CARDINAL
fbem-21	126	1	700	CARDINAL
fbem-21	127	1	7	CARDINAL
fbem-21	127	2	100 to 700	CARDINAL
fbem-21	127	3	8(a	CARDINAL
fbem-21	128	1	8(b	CARDINAL
fbem-21	128	2	8	CARDINAL
fbem-21	129	1	100~700	CARDINAL
fbem-21	129	2	8(b	CARDINAL
fbem-21	131	1	700	CARDINAL
fbem-21	131	2	three	CARDINAL
fbem-21	134	1	700	CARDINAL
fbem-21	134	2	8	CARDINAL
fbem-21	135	1	9	CARDINAL
fbem-21	136	1	210≤val≤255	CARDINAL
fbem-21	136	2	7	CARDINAL
fbem-21	136	3	9	CARDINAL
fbem-21	137	1	5	CARDINAL
fbem-21	137	2	29	CARDINAL
fbem-21	137	3	1	CARDINAL
fbem-21	137	4	5	CARDINAL
fbem-21	137	5	1	CARDINAL
fbem-21	138	1	1	CARDINAL
fbem-21	138	2	6.006 1.000 1.000 2	MONEY
fbem-21	138	3	5.095 2.87	MONEY
fbem-21	138	4	7.581 7.58	CARDINAL
fbem-21	138	5	8.975 6.973	CARDINAL
fbem-21	138	6	0.875	MONEY
fbem-21	138	7	0.875 5	CARDINAL
fbem-21	138	8	2.418 2.41 6	MONEY
fbem-21	138	9	5.044	CARDINAL
fbem-21	138	10	4.614 4.614 1.47	MONEY
fbem-21	138	11	10.148	CARDINAL
fbem-21	138	12	8.024 7.996	DATE
fbem-21	138	13	0.859 11	CARDINAL
fbem-21	138	14	5.957 5.936 0.892	MONEY
fbem-21	138	15	4.579	CARDINAL
fbem-21	138	16	1.528 1.528 14	CARDINAL
fbem-21	138	17	2.544	CARDINAL
fbem-21	138	18	15	CARDINAL
fbem-21	138	19	7.437	CARDINAL
fbem-21	138	20	5.067	CARDINAL
fbem-21	138	21	4.971	MONEY
fbem-21	138	22	1.459 17	CARDINAL
fbem-21	138	23	5.052	CARDINAL
fbem-21	138	24	1.455 18	CARDINAL
fbem-21	138	25	1.447 1.447 19	CARDINAL
fbem-21	138	26	6.987	CARDINAL
fbem-21	138	27	11.854	CARDINAL
fbem-21	138	28	6.824 0.836	MONEY
fbem-21	138	29	6.919 6.904 0.83 0.83	MONEY
fbem-21	138	30	6.929	MONEY
fbem-21	138	31	4.474	CARDINAL
fbem-21	138	32	24	CARDINAL
fbem-21	138	33	3.803 3.803 0.895	QUANTITY
fbem-21	138	34	3.803	CARDINAL
fbem-21	138	35	3.94	CARDINAL
fbem-21	138	36	1.301 27	CARDINAL
fbem-21	138	37	6.991	CARDINAL
fbem-21	138	38	1.001	MONEY
fbem-21	138	39	3.942 3.942	CARDINAL
fbem-21	138	40	29	CARDINAL
fbem-21	138	41	1.002	CARDINAL
fbem-21	140	1	6	CARDINAL
fbem-21	144	1	0.2mm	QUANTITY
fbem-21	144	2	only half	CARDINAL
fbem-21	144	3	0.1mm	QUANTITY
fbem-21	145	1	3	CARDINAL
fbem-21	145	2	29	CARDINAL
fbem-21	145	3	2	CARDINAL
fbem-21	145	4	2	CARDINAL
fbem-21	145	5	87	CARDINAL
fbem-21	145	6	0 98.85%	PERCENT
fbem-21	145	7	table2	GPE
fbem-21	146	1	98.85%	PERCENT
fbem-21	147	1	23	CARDINAL
fbem-21	148	1	23nozzle	CARDINAL
fbem-21	148	2	164.392	CARDINAL
fbem-21	149	1	148.685~165.937	CARDINAL
fbem-21	149	2	150	CARDINAL
fbem-21	150	1	170	CARDINAL
fbem-21	152	1	10	CARDINAL
fbem-21	153	1	10	CARDINAL
fbem-21	154	1	6	CARDINAL
fbem-21	159	1	98.85%	PERCENT
fbem-21	160	1	zhang buyang	PERSON
fbem-21	163	1	wuhan	GPE
fbem-21	163	2	hubei	GPE
fbem-21	163	3	2016	DATE
fbem-21	164	1	2	CARDINAL
fbem-21	167	1	nanjing	GPE
fbem-21	167	2	southeast university	ORG
fbem-21	167	3	2017	DATE
fbem-21	168	1	3	CARDINAL
fbem-21	168	2	zhang jichun	PERSON
fbem-21	168	3	zhang senlin	PERSON
fbem-21	170	1	2019	DATE
fbem-21	170	2	37(4	DATE
fbem-21	170	3	67-72	DATE
fbem-21	171	1	4	CARDINAL
fbem-21	171	2	xiao jinhui	PERSON
fbem-21	171	3	xiang xinjian	PERSON
fbem-21	173	1	journal of zhejiang university of science and technology	ORG
fbem-21	173	2	2018	DATE
fbem-21	173	3	488	CARDINAL
fbem-21	173	4	7	CARDINAL
fbem-21	174	1	5	CARDINAL
fbem-21	174	2	yue hao	PERSON
fbem-21	174	3	wu shuanhu	PERSON
fbem-21	174	4	xu jindong	PERSON
fbem-21	175	1	2019	DATE
fbem-21	175	2	10	CARDINAL
fbem-21	175	3	83	CARDINAL
fbem-21	176	1	6	CARDINAL
fbem-21	176	2	liu liwen	PERSON
fbem-21	176	3	guo xiangchuan	PERSON
fbem-21	178	1	2019	DATE
fbem-21	178	2	1115-1118	DATE
fbem-21	179	1	7	CARDINAL
fbem-21	179	2	chen junren	PERSON
fbem-21	179	3	gao fengqiang	PERSON
fbem-21	179	4	xiong kui	PERSON
fbem-21	181	1	2019	DATE
fbem-21	182	1	8	CARDINAL
fbem-21	182	2	zhu xianfeng	PERSON
fbem-21	182	3	pan hongjun	PERSON
fbem-21	184	1	jilin university (	ORG
fbem-21	184	2	2014	DATE
fbem-21	184	3	32(3	CARDINAL
fbem-21	184	4	308	CARDINAL
fbem-21	185	1	9	CARDINAL
fbem-21	185	2	zhang chi	PERSON
fbem-21	185	3	li yuanbo	PERSON
fbem-21	185	4	wang meimei	PERSON
fbem-21	185	5	chen long	PERSON
fbem-21	187	1	2017	DATE
fbem-21	187	2	47(3	DATE
fbem-21	187	3	49	CARDINAL
fbem-21	188	1	10	CARDINAL
fbem-21	188	2	zheng liqiang	PERSON
fbem-21	188	3	zhao fei	PERSON
fbem-21	188	4	guo jiangtao	PERSON
fbem-21	190	1	2019	DATE
fbem-21	190	2	38(3	DATE
fbem-21	190	3	103	CARDINAL