id	sid	eid	entity	type
fbem-28226	1	1	2766-824x	QUANTITY
fbem-28226	1	2	17	CARDINAL
fbem-28226	1	3	3	CARDINAL
fbem-28226	1	4	2024 67	DATE
fbem-28226	1	5	two	CARDINAL
fbem-28226	1	6	sino-us	NORP
fbem-28226	1	7	mengdi sun * chengdu jincheng university	PERSON
fbem-28226	1	8	chengdu	GPE
fbem-28226	1	9	sichuan	GPE
fbem-28226	1	10	china	GPE
fbem-28226	1	11	mengdi sun	PERSON
fbem-28226	1	12	2803356849@qq.com	CARDINAL
fbem-28226	1	13	the united states	GPE
fbem-28226	1	14	china	GPE
fbem-28226	1	15	2018	DATE
fbem-28226	1	16	china	GPE
fbem-28226	1	17	the united states	GPE
fbem-28226	2	1	august 9,2022	DATE
fbem-28226	2	2	the united states	GPE
fbem-28226	3	1	china	GPE
fbem-28226	3	2	china	GPE
fbem-28226	4	1	china	GPE
fbem-28226	4	2	the united states	GPE
fbem-28226	4	3	the united states	GPE
fbem-28226	5	1	sino-us	NORP
fbem-28226	6	1	1	CARDINAL
fbem-28226	7	1	chen jiyong	PERSON
fbem-28226	7	2	2018	DATE
fbem-28226	7	3	kwan	PERSON
fbem-28226	7	4	2020	DATE
fbem-28226	7	5	sino-us	NORP
fbem-28226	8	1	zhang huaxin et al	PERSON
fbem-28226	9	1	2019	DATE
fbem-28226	10	1	2019	DATE
fbem-28226	10	2	china	GPE
fbem-28226	11	1	cui	PERSON
fbem-28226	11	2	sun	PERSON
fbem-28226	11	3	melnikiene et al	PERSON
fbem-28226	12	1	2019	DATE
fbem-28226	13	1	one	CARDINAL
fbem-28226	14	1	taylor	PERSON
fbem-28226	14	2	2023	CARDINAL
fbem-28226	14	3	2022	CARDINAL
fbem-28226	15	1	xue lan et al	PERSON
fbem-28226	15	2	2022	CARDINAL
fbem-28226	16	1	2024	CARDINAL
fbem-28226	16	2	china	GPE
fbem-28226	17	1	luo & van assche 's	ORG
fbem-28226	17	2	2023	CARDINAL
fbem-28226	17	3	china	GPE
fbem-28226	17	4	the united states	GPE
fbem-28226	18	1	china	GPE
fbem-28226	18	2	china 2025'	ORG
fbem-28226	18	3	'14th	DATE
fbem-28226	18	4	china	GPE
fbem-28226	19	1	china	GPE
fbem-28226	21	1	baldwin & freeman	ORG
fbem-28226	21	2	2022	CARDINAL
fbem-28226	23	1	2	CARDINAL
fbem-28226	23	2	two	CARDINAL
fbem-28226	23	3	2.1	CARDINAL
fbem-28226	24	1	china	GPE
fbem-28226	24	2	the united states	GPE
fbem-28226	24	3	2.1.1	CARDINAL
fbem-28226	25	1	the united states	GPE
fbem-28226	26	1	2017	DATE
fbem-28226	26	2	us	GPE
fbem-28226	26	3	usd 496 billion	MONEY
fbem-28226	26	4	the national science foundation	ORG
fbem-28226	26	5	nih	ORG
fbem-28226	28	1	70 %	PERCENT
fbem-28226	29	1	2.1.2	CARDINAL
fbem-28226	29	2	china	GPE
fbem-28226	29	3	china	GPE
fbem-28226	31	1	china	GPE
fbem-28226	31	2	about 18	CARDINAL
fbem-28226	32	1	less than 30 %	PERCENT
fbem-28226	33	1	china	GPE
fbem-28226	33	2	96 million	CARDINAL
fbem-28226	33	3	740 million	CARDINAL
fbem-28226	34	1	2023	CARDINAL
fbem-28226	34	2	10.47 million	CARDINAL
fbem-28226	36	1	china	GPE
fbem-28226	36	2	68	CARDINAL
fbem-28226	37	1	china	GPE
fbem-28226	37	2	the united nations industrial classification	ORG
fbem-28226	38	1	the past decade	DATE
fbem-28226	39	1	2.2	CARDINAL
fbem-28226	44	1	2.2.1	CARDINAL
fbem-28226	46	1	five	CARDINAL
fbem-28226	46	2	japan	GPE
fbem-28226	46	3	shin-etsu chemical	ORG
fbem-28226	46	4	japan	GPE
fbem-28226	46	5	germany	GPE
fbem-28226	46	6	siltronic	GPE
fbem-28226	46	7	south korea's	GPE
fbem-28226	46	8	more than 90 %	PERCENT
fbem-28226	47	1	china	GPE
fbem-28226	49	1	40-50 % and 30 %	PERCENT
fbem-28226	50	1	japanese	NORP
fbem-28226	50	2	70 %	PERCENT
fbem-28226	51	1	2.2.2	CARDINAL
fbem-28226	52	1	more than 80 %	PERCENT
fbem-28226	52	2	22 %	PERCENT
fbem-28226	52	3	22 %	PERCENT
fbem-28226	52	4	17 %	PERCENT
fbem-28226	53	1	china	GPE
fbem-28226	56	1	china	GPE
fbem-28226	59	1	china	GPE
fbem-28226	60	1	china	GPE
fbem-28226	62	1	one	CARDINAL
fbem-28226	62	2	three	CARDINAL
fbem-28226	63	1	american	NORP
fbem-28226	63	2	japanese	NORP
fbem-28226	63	3	tokyo	GPE
fbem-28226	63	4	amat	ORG
fbem-28226	63	5	nearly 90 %	PERCENT
fbem-28226	64	1	china	GPE
fbem-28226	65	1	china micro	ORG
fbem-28226	65	2	north china	LOC
fbem-28226	65	3	about 1 %	PERCENT
fbem-28226	66	1	3	CARDINAL
fbem-28226	66	2	two	CARDINAL
fbem-28226	66	3	3.1	CARDINAL
fbem-28226	67	1	the united states	GPE
fbem-28226	67	2	3.1.1	CARDINAL
fbem-28226	68	1	sia	GPE
fbem-28226	68	2	2030	DATE
fbem-28226	68	3	the united states	GPE
fbem-28226	68	4	3.85 million	CARDINAL
fbem-28226	69	1	1.4 million	CARDINAL
fbem-28226	70	1	u.s.	GPE
fbem-28226	70	2	114,800	CARDINAL
fbem-28226	70	3	about 58 %	PERCENT
fbem-28226	70	4	67,000	CARDINAL
fbem-28226	72	1	u.s.	GPE
fbem-28226	73	1	the united states	GPE
fbem-28226	74	1	china	GPE
fbem-28226	74	2	the united states	GPE
fbem-28226	74	3	the united states	GPE
fbem-28226	75	1	chinese	NORP
fbem-28226	76	1	chinese	NORP
fbem-28226	76	2	american	NORP
fbem-28226	77	1	the united states	GPE
fbem-28226	77	2	recent years	DATE
fbem-28226	78	1	the united states	GPE
fbem-28226	79	1	3.2	CARDINAL
fbem-28226	80	1	3.2.1	CARDINAL
fbem-28226	80	2	the united states	GPE
fbem-28226	80	3	china	GPE
fbem-28226	81	1	the united states	GPE
fbem-28226	81	2	china	GPE
fbem-28226	81	3	american	NORP
fbem-28226	82	1	u.s.	GPE
fbem-28226	82	2	china	GPE
fbem-28226	82	3	1	CARDINAL
fbem-28226	83	1	the united states	GPE
fbem-28226	84	1	march	DATE
fbem-28226	84	2	japan	GPE
fbem-28226	85	1	3.2.2	CARDINAL
fbem-28226	85	2	china	GPE
fbem-28226	86	1	2023	CARDINAL
fbem-28226	86	2	about 766,500	CARDINAL
fbem-28226	86	3	about 200,000	CARDINAL
fbem-28226	87	1	china	GPE
fbem-28226	87	2	2	CARDINAL
fbem-28226	88	1	3.2.3	CARDINAL
fbem-28226	88	2	china	GPE
fbem-28226	89	1	china	GPE
fbem-28226	89	2	the united states	GPE
fbem-28226	89	3	american	NORP
fbem-28226	90	1	chinese	NORP
fbem-28226	91	1	4	CARDINAL
fbem-28226	91	2	4.1	CARDINAL
fbem-28226	91	3	us	GPE
fbem-28226	92	1	american	NORP
fbem-28226	92	2	intel	ORG
fbem-28226	92	3	nvidia	ORG
fbem-28226	93	1	china	GPE
fbem-28226	94	1	the united states	GPE
fbem-28226	94	2	china	GPE
fbem-28226	95	1	recent years	DATE
fbem-28226	96	1	ziguang zhanrui	GPE
fbem-28226	96	2	wuhan xinxin	ORG
fbem-28226	97	1	4.2	CARDINAL
fbem-28226	97	2	the united states'	GPE
fbem-28226	98	1	the united states	GPE
fbem-28226	98	2	5	CARDINAL
fbem-28226	99	1	the united states	GPE
fbem-28226	100	1	chinese	NORP
fbem-28226	102	1	4.3	CARDINAL
fbem-28226	102	2	the united states	GPE
fbem-28226	102	3	eda	ORG
fbem-28226	103	1	the united states	GPE
fbem-28226	104	1	china	GPE
fbem-28226	107	1	china	GPE
fbem-28226	108	1	4.4	CARDINAL
fbem-28226	108	2	the united states	GPE
fbem-28226	109	1	the united states	GPE
fbem-28226	110	1	chinese	NORP
fbem-28226	110	2	china 2025'	ORG
fbem-28226	110	3	14	CARDINAL
fbem-28226	110	4	five-year	DATE
fbem-28226	112	1	china	GPE
fbem-28226	113	1	china	GPE
fbem-28226	113	2	the united states	GPE
fbem-28226	113	3	china	GPE
fbem-28226	115	1	china	GPE
fbem-28226	115	2	the united states	GPE
fbem-28226	116	1	u.s.	GPE
fbem-28226	116	2	3	CARDINAL
fbem-28226	117	1	two	CARDINAL
fbem-28226	118	1	two	CARDINAL
fbem-28226	118	2	china	GPE
fbem-28226	118	3	the united states	GPE
fbem-28226	119	1	two	CARDINAL
fbem-28226	120	1	china	GPE
fbem-28226	120	2	70	CARDINAL
fbem-28226	120	3	the united states	GPE
fbem-28226	121	1	4	CARDINAL
fbem-28226	122	1	kwan	PERSON
fbem-28226	122	2	chi hung	PERSON
fbem-28226	123	1	2019	DATE
fbem-28226	124	1	the china-us trade war	ORG
fbem-28226	125	1	asian	NORP
fbem-28226	126	1	2	CARDINAL
fbem-28226	126	2	xu xuhua	PERSON
fbem-28226	126	3	liu yushu	PERSON
fbem-28226	127	1	2023	CARDINAL
fbem-28226	128	1	12-21 + 90	DATE
fbem-28226	129	1	3	CARDINAL
fbem-28226	129	2	yi sun	PERSON
fbem-28226	129	3	rasa melnikiene	PERSON
fbem-28226	129	4	malin song & jianlei mo	ORG
fbem-28226	130	1	2019	DATE
fbem-28226	130	2	sino-us	NORP
fbem-28226	131	1	4	CARDINAL
fbem-28226	131	2	2009	DATE
fbem-28226	132	1	sino-	NORP
fbem-28226	133	1	contemporary china	ORG
fbem-28226	133	2	18(60	CARDINAL
fbem-28226	133	3	479	CARDINAL