id	sid	eid	entity	type
fcis-23016	1	1	2832-6024	DATE
fcis-23016	2	1	8	CARDINAL
fcis-23016	2	2	3	CARDINAL
fcis-23016	2	3	2024 84	DATE
fcis-23016	2	4	zheng zou	PERSON
fcis-23016	2	5	peixuan zhu	GPE
fcis-23016	2	6	wuhan university of technology	ORG
fcis-23016	2	7	wuhan hubei	GPE
fcis-23016	2	8	china	GPE
fcis-23016	9	1	1	CARDINAL
fcis-23016	9	2	1	CARDINAL
fcis-23016	10	1	24.90 ± 0.03 mm	MONEY
fcis-23016	10	2	11.962 ± 0.024 mm	MONEY
fcis-23016	11	1	today	DATE
fcis-23016	14	1	1	CARDINAL
fcis-23016	14	2	two	CARDINAL
fcis-23016	14	3	shang xiaoyan et al	PERSON
fcis-23016	15	1	1	CARDINAL
fcis-23016	18	1	fu yu et al	PERSON
fcis-23016	19	1	2	CARDINAL
fcis-23016	19	2	first	ORDINAL
fcis-23016	20	1	yongqiang ren	PERSON
fcis-23016	21	1	3	CARDINAL
fcis-23016	24	1	85	CARDINAL
fcis-23016	25	1	2	CARDINAL
fcis-23016	25	2	first	ORDINAL
fcis-23016	26	1	2	CARDINAL
fcis-23016	26	2	3	CARDINAL
fcis-23016	27	1	2	CARDINAL
fcis-23016	32	1	3	CARDINAL
fcis-23016	34	1	3	CARDINAL
fcis-23016	34	2	3.1	CARDINAL
fcis-23016	39	1	three	CARDINAL
fcis-23016	39	2	two	CARDINAL
fcis-23016	43	1	4	CARDINAL
fcis-23016	43	2	5	CARDINAL
fcis-23016	43	3	first	ORDINAL
fcis-23016	44	1	100 mm	QUANTITY
fcis-23016	44	2	4	CARDINAL
fcis-23016	45	1	10 μm	CARDINAL
fcis-23016	46	1	100 μm	CARDINAL
fcis-23016	46	2	86	CARDINAL
fcis-23016	48	1	100 μm	CARDINAL
fcis-23016	48	2	10 μm	CARDINAL
fcis-23016	49	1	16	CARDINAL
fcis-23016	49	2	5	CARDINAL
fcis-23016	51	1	two	CARDINAL
fcis-23016	51	2	1	CARDINAL
fcis-23016	51	3	0.5x	CARDINAL
fcis-23016	52	1	3.45 μm	CARDINAL
fcis-23016	52	2	3.45 μm	CARDINAL
fcis-23016	52	3	100 μm	CARDINAL
fcis-23016	53	1	≈ 14.493	DATE
fcis-23016	54	1	first	ORDINAL
fcis-23016	57	1	two	CARDINAL
fcis-23016	58	1	2	CARDINAL
fcis-23016	59	1	3	CARDINAL
fcis-23016	59	2	4	CARDINAL
fcis-23016	59	3	100 mm	QUANTITY
fcis-23016	59	4	100 mm	QUANTITY
fcis-23016	60	1	2 3	CARDINAL
fcis-23016	61	1	6	CARDINAL
fcis-23016	61	2	16	CARDINAL
fcis-23016	61	3	100 mm	QUANTITY
fcis-23016	61	4	100 mm	QUANTITY
fcis-23016	62	1	1	CARDINAL
fcis-23016	63	1	3.2	CARDINAL
fcis-23016	65	1	4	CARDINAL
fcis-23016	66	1	7	CARDINAL
fcis-23016	67	1	8	CARDINAL
fcis-23016	69	1	9	CARDINAL
fcis-23016	72	1	four	CARDINAL
fcis-23016	72	2	four	CARDINAL
fcis-23016	73	1	10	CARDINAL
fcis-23016	76	1	two	CARDINAL
fcis-23016	76	2	one	CARDINAL
fcis-23016	76	3	11	CARDINAL
fcis-23016	77	1	3.3	CARDINAL
fcis-23016	80	1	12	CARDINAL
fcis-23016	81	1	87	CARDINAL
fcis-23016	81	2	6	CARDINAL
fcis-23016	81	3	7	CARDINAL
fcis-23016	81	4	8	CARDINAL
fcis-23016	81	5	88	CARDINAL
fcis-23016	81	6	a)gaussian	NORP
fcis-23016	81	7	9	CARDINAL
fcis-23016	81	8	10	CARDINAL
fcis-23016	82	1	11	CARDINAL
fcis-23016	83	1	12	CARDINAL
fcis-23016	84	1	four	CARDINAL
fcis-23016	86	1	13	CARDINAL
fcis-23016	86	2	two	CARDINAL
fcis-23016	89	1	13	CARDINAL
fcis-23016	92	1	four	CARDINAL
fcis-23016	94	1	14	CARDINAL
fcis-23016	96	1	14	DATE
fcis-23016	97	1	14	DATE
fcis-23016	98	1	89 4	DATE
fcis-23016	99	1	seven	CARDINAL
fcis-23016	99	2	1	CARDINAL
fcis-23016	100	1	asterisk	ORG
fcis-23016	101	1	1	CARDINAL
fcis-23016	101	2	1	CARDINAL
fcis-23016	101	3	2	CARDINAL
fcis-23016	101	4	3	CARDINAL
fcis-23016	101	5	4	CARDINAL
fcis-23016	101	6	5	CARDINAL
fcis-23016	101	7	6	CARDINAL
fcis-23016	101	8	7	CARDINAL
fcis-23016	101	9	11945.83	CARDINAL
fcis-23016	101	10	11949.39	CARDINAL
fcis-23016	101	11	11946.86 11948.82	CARDINAL
fcis-23016	101	12	4.71 11957.0	CARDINAL
fcis-23016	101	13	8.42	CARDINAL
fcis-23016	101	14	24955.96	CARDINAL
fcis-23016	101	15	11955.80	CARDINAL
fcis-23016	101	16	11956.78	CARDINAL
fcis-23016	101	17	11956.40	CARDINAL
fcis-23016	101	18	0.87	CARDINAL
fcis-23016	101	19	24952.53	CARDINAL
fcis-23016	101	20	24952.83	CARDINAL
fcis-23016	101	21	24952.76	CARDINAL
fcis-23016	101	22	1	CARDINAL
fcis-23016	109	1	1	CARDINAL
fcis-23016	109	2	shang xiaoyan	PERSON
fcis-23016	109	3	jiang xu	PERSON
fcis-23016	109	4	wu jian	PERSON
fcis-23016	111	1	2012	DATE
fcis-23016	111	2	46(3	DATE
fcis-23016	111	3	85-87	DATE
fcis-23016	112	1	2	CARDINAL
fcis-23016	112	2	zhong shaojun	PERSON
fcis-23016	112	3	xie min	PERSON
fcis-23016	114	1	2012	DATE
fcis-23016	114	2	38(9	DATE
fcis-23016	114	3	144	CARDINAL
fcis-23016	115	1	3	CARDINAL
fcis-23016	115	2	tu dejiang	GPE
fcis-23016	115	3	han shu	PERSON
fcis-23016	118	1	2020(9	CARDINAL
fcis-23016	118	2	151	CARDINAL