id	sid	eid	entity	type
fcis-29530	1	1	2832-6024	DATE
fcis-29530	2	1	11	CARDINAL
fcis-29530	2	2	2	CARDINAL
fcis-29530	2	3	2025 11	DATE
fcis-29530	2	4	robot+	ORG
fcis-29530	2	5	conghao ruan	PERSON
fcis-29530	2	6	wei su school	PERSON
fcis-29530	2	7	jilin institute of chemical technology	ORG
fcis-29530	2	8	jilin	GPE
fcis-29530	2	9	jilin	GPE
fcis-29530	2	10	132000	DATE
fcis-29530	2	11	china	GPE
fcis-29530	4	1	firstly	ORDINAL
fcis-29530	8	1	robot+	ORG
fcis-29530	9	1	robot+	ORG
fcis-29530	10	1	1	CARDINAL
fcis-29530	14	1	1	CARDINAL
fcis-29530	17	1	2	CARDINAL
fcis-29530	19	1	3	CARDINAL
fcis-29530	19	2	1	CARDINAL
fcis-29530	19	3	platform+ n	PRODUCT
fcis-29530	20	1	huang hao	PERSON
fcis-29530	21	1	4	CARDINAL
fcis-29530	22	1	zhang liguo	PERSON
fcis-29530	23	1	5	CARDINAL
fcis-29530	25	1	robot+	ORG
fcis-29530	27	1	2	CARDINAL
fcis-29530	27	2	2.1	CARDINAL
fcis-29530	29	1	1	CARDINAL
fcis-29530	30	1	firstly	ORDINAL
fcis-29530	32	1	2	CARDINAL
fcis-29530	33	1	3d	CARDINAL
fcis-29530	35	1	12	CARDINAL
fcis-29530	36	1	6	CARDINAL
fcis-29530	38	1	2	CARDINAL
fcis-29530	39	1	2.2	CARDINAL
fcis-29530	39	2	3	CARDINAL
fcis-29530	40	1	3	CARDINAL
fcis-29530	48	1	13	CARDINAL
fcis-29530	51	1	3	CARDINAL
fcis-29530	51	2	3.1	CARDINAL
fcis-29530	52	1	4	CARDINAL
fcis-29530	53	1	4	CARDINAL
fcis-29530	55	1	8	CARDINAL
fcis-29530	56	1	3.2	CARDINAL
fcis-29530	57	1	two	CARDINAL
fcis-29530	59	1	1	CARDINAL
fcis-29530	59	2	1	CARDINAL
fcis-29530	59	3	m20.0	DATE
fcis-29530	59	4	wl02 m200	PRODUCT
fcis-29530	59	5	m20.1	DATE
fcis-29530	59	6	bool wl02	PERSON
fcis-29530	59	7	1 m21.0	QUANTITY
fcis-29530	59	8	wl02 m210	PRODUCT
fcis-29530	59	9	90 degrees m21.1	QUANTITY
fcis-29530	59	10	0 degrees	QUANTITY
fcis-29530	59	11	1 m1.0	QUANTITY
fcis-29530	59	12	wl02 qd1	ORG
fcis-29530	59	13	1	CARDINAL
fcis-29530	59	14	bool wl02 wc1 external	PERSON
fcis-29530	59	15	2 m2.0 bool wl02	QUANTITY
fcis-29530	59	16	2 m2.1	QUANTITY
fcis-29530	59	17	bool wl02 wc2	PERSON
fcis-29530	59	18	sensor1	PRODUCT
fcis-29530	60	1	wl02 m300	PRODUCT
fcis-29530	60	2	0	CARDINAL
fcis-29530	60	3	1 1	CARDINAL
fcis-29530	60	4	wl02 m2	PRODUCT
fcis-29530	60	5	2 2	CARDINAL
fcis-29530	60	6	bool wl02 m3	PERSON
fcis-29530	60	7	3 3	CARDINAL
fcis-29530	60	8	wl02 m4	PRODUCT
fcis-29530	60	9	4	CARDINAL
fcis-29530	60	10	5 5	CARDINAL
fcis-29530	60	11	wl02 m6	ORG
fcis-29530	60	12	6 6	CARDINAL
fcis-29530	60	13	wl02 m7	ORG
fcis-29530	60	14	7 7	DATE
fcis-29530	60	15	bool wl02 m8 internalsignal 3.3	PERSON
fcis-29530	63	1	first	ORDINAL
fcis-29530	64	1	14	CARDINAL
fcis-29530	64	2	9	CARDINAL
fcis-29530	65	1	2	CARDINAL
fcis-29530	65	2	2	CARDINAL
fcis-29530	65	3	0	CARDINAL
fcis-29530	65	4	1	CARDINAL
fcis-29530	65	5	0	CARDINAL
fcis-29530	65	6	2	CARDINAL
fcis-29530	65	7	0	CARDINAL
fcis-29530	65	8	1	CARDINAL
fcis-29530	65	9	0	CARDINAL
fcis-29530	65	10	2	CARDINAL
fcis-29530	65	11	0	CARDINAL
fcis-29530	65	12	m201	PRODUCT
fcis-29530	65	13	0	CARDINAL
fcis-29530	65	14	0	CARDINAL
fcis-29530	65	15	0	CARDINAL
fcis-29530	65	16	1	CARDINAL
fcis-29530	65	17	0	CARDINAL
fcis-29530	65	18	1	CARDINAL
fcis-29530	65	19	0 degrees	QUANTITY
fcis-29530	65	20	0	CARDINAL
fcis-29530	65	21	1	CARDINAL
fcis-29530	65	22	90 degrees	QUANTITY
fcis-29530	65	23	0	CARDINAL
fcis-29530	65	24	0	CARDINAL
fcis-29530	65	25	0	CARDINAL
fcis-29530	66	1	0	CARDINAL
fcis-29530	66	2	4	CARDINAL
fcis-29530	66	3	4.1	CARDINAL
fcis-29530	71	1	first	ORDINAL
fcis-29530	73	1	m3	PRODUCT
fcis-29530	73	2	4.2	CARDINAL
fcis-29530	73	3	the siemens s7-1200	ORG
fcis-29530	75	1	first	ORDINAL
fcis-29530	76	1	1	CARDINAL
fcis-29530	78	1	10	CARDINAL
fcis-29530	79	1	5	CARDINAL
fcis-29530	80	1	4.3	CARDINAL
fcis-29530	83	1	first	ORDINAL
fcis-29530	84	1	15	CARDINAL
fcis-29530	86	1	6	CARDINAL
fcis-29530	87	1	5	CARDINAL
fcis-29530	87	2	plc	ORG
fcis-29530	87	3	6	CARDINAL
fcis-29530	88	1	hmi	ORG
fcis-29530	88	2	5	CARDINAL
fcis-29530	94	1	1	CARDINAL
fcis-29530	94	2	chen yan	PERSON
fcis-29530	95	1	cnc	ORG
fcis-29530	97	1	jiangsu university	ORG
fcis-29530	97	2	2013	DATE
fcis-29530	98	1	2	CARDINAL
fcis-29530	98	2	hou jiali	PERSON
fcis-29530	101	1	2021	CARDINAL
fcis-29530	101	2	11	CARDINAL
fcis-29530	101	3	81-83+88	DATE
fcis-29530	102	1	3	CARDINAL
fcis-29530	102	2	chen kunjie	PERSON
fcis-29530	102	3	li lingxiao	PERSON
fcis-29530	104	1	2020,5	CARDINAL
fcis-29530	104	2	16	CARDINAL
fcis-29530	104	3	224	CARDINAL
fcis-29530	105	1	4	CARDINAL
fcis-29530	105	2	huang hao	PERSON
fcis-29530	105	3	wei siyang	PERSON
fcis-29530	105	4	han	NORP
fcis-29530	108	1	2024	DATE
fcis-29530	108	2	40	DATE
fcis-29530	108	3	11	CARDINAL
fcis-29530	108	4	27-31	DATE
fcis-29530	109	1	5	CARDINAL
fcis-29530	109	2	zhang liguo	PERSON
fcis-29530	109	3	gao haikuo	PERSON
fcis-29530	109	4	li jie	PERSON
fcis-29530	111	1	2024	DATE
fcis-29530	111	2	25	DATE
fcis-29530	111	3	168	CARDINAL
fcis-29530	112	1	6	CARDINAL
fcis-29530	112	2	yang shuangxing.	PERSON
fcis-29530	114	1	2023	CARDINAL
fcis-29530	114	2	45	DATE
fcis-29530	114	3	10	CARDINAL
fcis-29530	115	1	zhao yantong	PERSON
fcis-29530	118	1	business economics research	ORG
fcis-29530	118	2	2022	CARDINAL
fcis-29530	119	1	8	CARDINAL
fcis-29530	119	2	yan xiaoyong.	PERSON
fcis-29530	120	1	siemens s7-1200	PERSON
fcis-29530	122	1	2024	CARDINAL
fcis-29530	122	2	32	DATE
fcis-29530	122	3	12	CARDINAL
fcis-29530	122	4	107	CARDINAL
fcis-29530	123	1	9	CARDINAL
fcis-29530	123	2	xiao han	PERSON
fcis-29530	123	3	meng wen	PERSON
fcis-29530	123	4	mao yuhua	PERSON
fcis-29530	126	1	2024	CARDINAL
fcis-29530	126	2	32	DATE
fcis-29530	127	1	10	CARDINAL
fcis-29530	127	2	jiang hao	PERSON
fcis-29530	127	3	zhang yifan	PERSON
fcis-29530	127	4	wei changzhou	PERSON
fcis-29530	128	1	2023	CARDINAL
fcis-29530	128	2	38	DATE
fcis-29530	128	3	9	CARDINAL
fcis-29530	128	4	237	CARDINAL