id	sid	eid	entity	type
fcis-30006	1	1	2832-6024	DATE
fcis-30006	2	1	11	CARDINAL
fcis-30006	2	2	3	CARDINAL
fcis-30006	2	3	29	CARDINAL
fcis-30006	2	4	lei zhang	PERSON
fcis-30006	2	5	li	PERSON
fcis-30006	2	6	jinbing wang guizhou	PERSON
fcis-30006	2	7	guiyang guizhou	PERSON
fcis-30006	2	8	55009	DATE
fcis-30006	2	9	china	GPE
fcis-30006	3	1	1	CARDINAL
fcis-30006	3	2	2.3μm	CARDINAL
fcis-30006	3	3	45±2°	CARDINAL
fcis-30006	3	4	2	CARDINAL
fcis-30006	3	5	98.7%	PERCENT
fcis-30006	3	6	3	CARDINAL
fcis-30006	3	7	150ms	ORG
fcis-30006	4	1	32%	PERCENT
fcis-30006	4	2	22.5%	PERCENT
fcis-30006	4	3	98.4%	PERCENT
fcis-30006	6	1	1	CARDINAL
fcis-30006	6	2	millions	CARDINAL
fcis-30006	6	3	annually	DATE
fcis-30006	8	1	three	CARDINAL
fcis-30006	8	2	37.6%	PERCENT
fcis-30006	8	3	25-34	DATE
fcis-30006	8	4	62.3%	PERCENT
fcis-30006	8	5	50	CARDINAL
fcis-30006	8	6	200	CARDINAL
fcis-30006	9	1	23.8%	PERCENT
fcis-30006	9	2	34.7%	PERCENT
fcis-30006	9	3	1	CARDINAL
fcis-30006	10	1	internet+	GPE
fcis-30006	10	2	2	CARDINAL
fcis-30006	10	3	china	GPE
fcis-30006	10	4	2025	DATE
fcis-30006	11	1	3	CARDINAL
fcis-30006	12	1	10%	PERCENT
fcis-30006	12	2	7.2%	PERCENT
fcis-30006	12	3	4	CARDINAL
fcis-30006	13	1	tao	PERSON
fcis-30006	13	2	5	CARDINAL
fcis-30006	13	3	wei	PERSON
fcis-30006	13	4	98.6%	PERCENT
fcis-30006	13	5	7	CARDINAL
fcis-30006	13	6	xiao	PERSON
fcis-30006	13	7	29.4%	PERCENT
fcis-30006	13	8	8	CARDINAL
fcis-30006	14	1	multisource	ORG
fcis-30006	15	1	10	CARDINAL
fcis-30006	15	2	99.2%	PERCENT
fcis-30006	16	1	14	CARDINAL
fcis-30006	17	1	12	CARDINAL
fcis-30006	17	2	67%	PERCENT
fcis-30006	18	1	only 68.5%	PERCENT
fcis-30006	18	2	85%	PERCENT
fcis-30006	19	1	1	CARDINAL
fcis-30006	19	2	200ms	ORG
fcis-30006	19	3	2	CARDINAL
fcis-30006	19	4	99.8%	PERCENT
fcis-30006	19	5	3	CARDINAL
fcis-30006	19	6	10,000	CARDINAL
fcis-30006	20	1	41.7%	PERCENT
fcis-30006	20	2	28.3%	PERCENT
fcis-30006	21	1	2	CARDINAL
fcis-30006	21	2	four	CARDINAL
fcis-30006	22	1	1	CARDINAL
fcis-30006	22	2	1	CARDINAL
fcis-30006	22	3	14	CARDINAL
fcis-30006	22	4	2	CARDINAL
fcis-30006	22	5	150ms	PRODUCT
fcis-30006	22	6	3	CARDINAL
fcis-30006	22	7	500k	CARDINAL
fcis-30006	22	8	sec	ORG
fcis-30006	22	9	200	CARDINAL
fcis-30006	22	10	4	CARDINAL
fcis-30006	22	11	92.4%	PERCENT
fcis-30006	22	12	10,000	CARDINAL
fcis-30006	23	1	8.2s	CARDINAL
fcis-30006	24	1	5g/zigbee	QUANTITY
fcis-30006	24	2	328	CARDINAL
fcis-30006	24	3	010khz	DATE
fcis-30006	25	1	98.7%	PERCENT
fcis-30006	26	1	three	CARDINAL
fcis-30006	26	2	18.7%	PERCENT
fcis-30006	27	1	mqtt	PERSON
fcis-30006	27	2	200ms	LAW
fcis-30006	27	3	17	CARDINAL
fcis-30006	28	1	30	CARDINAL
fcis-30006	29	1	apache nifi	LOC
fcis-30006	29	2	3.2:1	CARDINAL
fcis-30006	30	1	32	CARDINAL
fcis-30006	30	2	19	CARDINAL
fcis-30006	30	3	8 dimensions	QUANTITY
fcis-30006	30	4	120	CARDINAL
fcis-30006	31	1	1	CARDINAL
fcis-30006	31	2	oee	PRODUCT
fcis-30006	31	3	1hz	ORDINAL
fcis-30006	31	4	2	CARDINAL
fcis-30006	31	5	3	CARDINAL
fcis-30006	31	6	23.4%	PERCENT
fcis-30006	33	1	0.914	CARDINAL
fcis-30006	34	1	3	CARDINAL
fcis-30006	35	1	1	CARDINAL
fcis-30006	35	2	∑	ORG
fcis-30006	35	3	∑	ORG
fcis-30006	37	1	1	CARDINAL
fcis-30006	41	1	four	CARDINAL
fcis-30006	43	1	3.1	CARDINAL
fcis-30006	43	2	2	CARDINAL
fcis-30006	43	3	model;dtpeop	ORG
fcis-30006	47	1	3	CARDINAL
fcis-30006	47	2	datad	ORG
fcis-30006	47	3	4	CARDINAL
fcis-30006	48	1	gm	ORG
fcis-30006	50	1	5	CARDINAL
fcis-30006	50	2	datad	ORG
fcis-30006	50	3	6	CARDINAL
fcis-30006	50	4	3d	CARDINAL
fcis-30006	50	5	31	CARDINAL
fcis-30006	50	6	7	CARDINAL
fcis-30006	50	7	datad	ORG
fcis-30006	50	8	pel	ORG
fcis-30006	50	9	3d	CARDINAL
fcis-30006	50	10	3.2	CARDINAL
fcis-30006	52	1	3	CARDINAL
fcis-30006	52	2	1	CARDINAL
fcis-30006	52	3	9	CARDINAL
fcis-30006	52	4	10	CARDINAL
fcis-30006	52	5	11	CARDINAL
fcis-30006	52	6	3.3	CARDINAL
fcis-30006	56	1	3d	CARDINAL
fcis-30006	56	2	datad	ORG
fcis-30006	56	3	12	CARDINAL
fcis-30006	58	1	mm	PERSON
fcis-30006	58	2	3.4	CARDINAL
fcis-30006	64	1	2	CARDINAL
fcis-30006	64	2	2	CARDINAL
fcis-30006	67	1	3d	CARDINAL
fcis-30006	67	2	3	CARDINAL
fcis-30006	69	1	32	CARDINAL
fcis-30006	70	1	3 three	CARDINAL
fcis-30006	70	2	3d	CARDINAL
fcis-30006	70	3	max	PERSON
fcis-30006	73	1	3d	CARDINAL
fcis-30006	73	2	max	PERSON
fcis-30006	73	3	3d	CARDINAL
fcis-30006	75	1	4	CARDINAL
fcis-30006	75	2	4.1	CARDINAL
fcis-30006	78	1	13	CARDINAL
fcis-30006	78	2	14	CARDINAL
fcis-30006	78	3	15	CARDINAL
fcis-30006	78	4	pdi	PERSON
fcis-30006	81	1	4	CARDINAL
fcis-30006	83	1	4.2	CARDINAL
fcis-30006	84	1	two	CARDINAL
fcis-30006	89	1	33	CARDINAL
fcis-30006	89	2	4	CARDINAL
fcis-30006	90	1	1	CARDINAL
fcis-30006	90	2	siemens s7-1500	ORG
fcis-30006	93	1	2	CARDINAL
fcis-30006	93	2	siemens s7 protocol	PERSON
fcis-30006	94	1	siemens	ORG
fcis-30006	94	2	siemens internal products	ORG
fcis-30006	95	1	3	CARDINAL
fcis-30006	96	1	6	CARDINAL
fcis-30006	97	1	4	CARDINAL
fcis-30006	99	1	3d	CARDINAL
fcis-30006	102	1	5	CARDINAL
fcis-30006	103	1	sub-second	CARDINAL
fcis-30006	103	2	500ms	ORG
fcis-30006	104	1	200	CARDINAL
fcis-30006	104	2	99.3%	PERCENT
fcis-30006	104	3	3d	CARDINAL
fcis-30006	105	1	42.7%	PERCENT
fcis-30006	105	2	31.5%	PERCENT
fcis-30006	105	3	28.4%	PERCENT
fcis-30006	107	1	1	CARDINAL
fcis-30006	107	2	2	CARDINAL
fcis-30006	107	3	3	CARDINAL
fcis-30006	109	1	guizhou tobacco company guiyang company science	ORG
fcis-30006	109	2	2022	CARDINAL
fcis-30006	110	1	zhu yanyan	PERSON
fcis-30006	112	1	2022	CARDINAL
fcis-30006	112	2	27(1	CARDINAL
fcis-30006	112	3	108	CARDINAL
fcis-30006	113	1	2	CARDINAL
fcis-30006	113	2	liu ning.	PERSON
fcis-30006	115	1	china	GPE
fcis-30006	115	2	2021	CARDINAL
fcis-30006	115	3	92-93	CARDINAL
fcis-30006	116	1	3	CARDINAL
fcis-30006	116	2	zhang shu	PERSON
fcis-30006	117	1	4.0	CARDINAL
fcis-30006	119	1	2014	DATE
fcis-30006	119	2	43(8	CARDINAL
fcis-30006	119	3	1-5	CARDINAL
fcis-30006	119	4	34	CARDINAL
fcis-30006	120	1	4	CARDINAL
fcis-30006	120	2	li xin	PERSON
fcis-30006	120	3	liu xiu	PERSON
fcis-30006	120	4	wan xinxin	PERSON
fcis-30006	123	1	2019	DATE
fcis-30006	123	2	31(3	CARDINAL
fcis-30006	123	3	385	CARDINAL
fcis-30006	124	1	5	CARDINAL
fcis-30006	124	2	tao fei	PERSON
fcis-30006	124	3	cheng ying	PERSON
fcis-30006	124	4	cheng jiangfeng	PERSON
fcis-30006	125	1	2017	DATE
fcis-30006	125	2	23(8	DATE
fcis-30006	125	3	1603-1611	DATE
fcis-30006	126	1	6	CARDINAL
fcis-30006	126	2	tao fei	PERSON
fcis-30006	126	3	zhang meng	PERSON
fcis-30006	126	4	cheng jiangfeng	PERSON
fcis-30006	129	1	2017	DATE
fcis-30006	129	2	23(1	DATE
fcis-30006	129	3	1-9	DATE
fcis-30006	130	1	wei yixiong	PERSON
fcis-30006	130	2	guo lei	PERSON
fcis-30006	130	3	chen liangxi	PERSON
fcis-30006	131	1	2021	CARDINAL
fcis-30006	131	2	352	CARDINAL
fcis-30006	132	1	8	CARDINAL
fcis-30006	132	2	xiao qingyang	PERSON
fcis-30006	132	3	wang long	PERSON
fcis-30006	135	1	2021	CARDINAL
fcis-30006	135	2	572(10	DATE
fcis-30006	135	3	129	CARDINAL
fcis-30006	136	1	9	CARDINAL
fcis-30006	136	2	guo dongsheng	PERSON
fcis-30006	136	3	bao jinsong	PERSON
fcis-30006	136	4	shi gongwei	PERSON
fcis-30006	138	1	donghua university	ORG
fcis-30006	138	2	2018	DATE
fcis-30006	138	3	44(4	ORG
fcis-30006	138	4	578	CARDINAL
fcis-30006	138	5	607	CARDINAL
fcis-30006	139	1	10	CARDINAL
fcis-30006	139	2	guo lei	PERSON
fcis-30006	139	3	chen xingyu	PERSON
fcis-30006	139	4	zhang yanlong	PERSON
fcis-30006	140	1	2019	DATE
fcis-30006	140	2	21	CARDINAL
fcis-30006	141	1	11	CARDINAL
fcis-30006	141	2	duan r	PERSON
fcis-30006	141	3	deng j x	PERSON
fcis-30006	141	4	ge d l	ORG
fcis-30006	143	1	2018	DATE
fcis-30006	143	2	98	CARDINAL
fcis-30006	143	3	/11 /12	PERSON
fcis-30006	143	4	28492863	CARDINAL
fcis-30006	144	1	12	CARDINAL
fcis-30006	147	1	dalian	GPE
fcis-30006	147	2	dalian university of technology	ORG
fcis-30006	147	3	2020	DATE
fcis-30006	148	1	13	CARDINAL
fcis-30006	148	2	krückl h p	ORG
fcis-30006	150	1	2022	CARDINAL
fcis-30006	150	2	77	CARDINAL
fcis-30006	150	3	75-86	CARDINAL
fcis-30006	151	1	14	CARDINAL
fcis-30006	151	2	wang xiaoming	PERSON
fcis-30006	154	1	2017	DATE
fcis-30006	154	2	258	CARDINAL
fcis-30006	155	1	15	CARDINAL
fcis-30006	155	2	yang x	PERSON
fcis-30006	155	3	chen y p	PERSON
fcis-30006	156	1	3d	CARDINAL
fcis-30006	158	1	2017	DATE
fcis-30006	158	2	18(2): 245256	DATE
fcis-30006	159	1	16	CARDINAL
fcis-30006	159	2	zhao j	PERSON
fcis-30006	160	1	optik	ORG
fcis-30006	160	2	2019	DATE
fcis-30006	160	3	186	CARDINAL
fcis-30006	160	4	52	CARDINAL
fcis-30006	161	1	17	CARDINAL
fcis-30006	161	2	tong x	PERSON
fcis-30006	161	3	yang s c	PERSON
fcis-30006	161	4	liu x l	PERSON
fcis-30006	163	1	2019	DATE
fcis-30006	163	2	233(17	ORG
fcis-30006	163	3	5989-6004	DATE
fcis-30006	164	1	18	CARDINAL
fcis-30006	164	2	xiao guijian	PERSON
fcis-30006	164	3	zhu shengwang	PERSON
fcis-30006	164	4	tc17	PRODUCT
fcis-30006	166	1	2023	CARDINAL
fcis-30006	166	2	59(9	DATE
fcis-30006	166	3	360-372	DATE
fcis-30006	167	1	19	CARDINAL
fcis-30006	167	2	wang x	PERSON
fcis-30006	167	3	zhou x l.	PERSON
fcis-30006	168	1	2022	CARDINAL
fcis-30006	168	2	292	CARDINAL