id	sid	tid	token	lemma	pos
fcis-3166	1	1	frontiers	frontier	NOUN
fcis-3166	1	2	in	in	ADP
fcis-3166	1	3	computing	computing	NOUN
fcis-3166	1	4	and	and	CCONJ
fcis-3166	1	5	intelligent	intelligent	ADJ
fcis-3166	1	6	systems	system	NOUN
fcis-3166	1	7	issn	issn	VERB
fcis-3166	1	8	:	:	PUNCT
fcis-3166	1	9	2832	2832	NUM
fcis-3166	1	10	-	-	SYM
fcis-3166	1	11	6024	6024	NUM
fcis-3166	1	12	|	|	NOUN
fcis-3166	1	13	vol	vol	NOUN
fcis-3166	1	14	.	.	PROPN
fcis-3166	2	1	2	2	NUM
fcis-3166	2	2	,	,	PUNCT
fcis-3166	2	3	no	no	INTJ
fcis-3166	2	4	.	.	NOUN
fcis-3166	2	5	1	1	NUM
fcis-3166	2	6	,	,	PUNCT
fcis-3166	2	7	2022	2022	NUM
fcis-3166	2	8	86	86	NUM
fcis-3166	2	9	investigation	investigation	NOUN
fcis-3166	2	10	report	report	NOUN
fcis-3166	2	11	of	of	ADP
fcis-3166	2	12	aero	aero	PROPN
fcis-3166	2	13	engine	engine	NOUN
fcis-3166	2	14	air	air	NOUN
fcis-3166	2	15	die	die	VERB
fcis-3166	2	16	hole	hole	NOUN
fcis-3166	2	17	processing	processing	PROPN
fcis-3166	2	18	li	li	PROPN
fcis-3166	2	19	yu	yu	PROPN
fcis-3166	2	20	,	,	PUNCT
fcis-3166	2	21	chenlei	chenlei	VERB
fcis-3166	2	22	zhao	zhao	PROPN
fcis-3166	2	23	,	,	PUNCT
fcis-3166	2	24	yong	yong	PROPN
fcis-3166	2	25	yang	yang	PROPN
fcis-3166	2	26	,	,	PUNCT
fcis-3166	2	27	shenghong	shenghong	PROPN
fcis-3166	2	28	wu	wu	PROPN
fcis-3166	2	29	geely	geely	PROPN
fcis-3166	2	30	university	university	PROPN
fcis-3166	2	31	of	of	ADP
fcis-3166	2	32	china	china	PROPN
fcis-3166	2	33	,	,	PUNCT
fcis-3166	2	34	sichuan	sichuan	PROPN
fcis-3166	2	35	641423	641423	NUM
fcis-3166	2	36	,	,	PUNCT
fcis-3166	2	37	china	china	PROPN
fcis-3166	2	38	abstract	abstract	NOUN
fcis-3166	2	39	:	:	PUNCT
fcis-3166	2	40	at	at	ADP
fcis-3166	2	41	present	present	ADJ
fcis-3166	2	42	,	,	PUNCT
fcis-3166	2	43	there	there	PRON
fcis-3166	2	44	are	be	VERB
fcis-3166	2	45	a	a	DET
fcis-3166	2	46	variety	variety	NOUN
fcis-3166	2	47	of	of	ADP
fcis-3166	2	48	problems	problem	NOUN
fcis-3166	2	49	in	in	ADP
fcis-3166	2	50	the	the	DET
fcis-3166	2	51	aerospace	aerospace	NOUN
fcis-3166	2	52	manufacturing	manufacturing	NOUN
fcis-3166	2	53	industry	industry	NOUN
fcis-3166	2	54	,	,	PUNCT
fcis-3166	2	55	especially	especially	ADV
fcis-3166	2	56	the	the	DET
fcis-3166	2	57	machining	machining	NOUN
fcis-3166	2	58	of	of	ADP
fcis-3166	2	59	aero	aero	ADJ
fcis-3166	2	60	-	-	PUNCT
fcis-3166	2	61	engine	engine	NOUN
fcis-3166	2	62	air	air	NOUN
fcis-3166	2	63	film	film	NOUN
fcis-3166	2	64	holes	hole	NOUN
fcis-3166	2	65	.	.	PUNCT
fcis-3166	3	1	in	in	ADP
fcis-3166	3	2	this	this	DET
fcis-3166	3	3	paper	paper	NOUN
fcis-3166	3	4	,	,	PUNCT
fcis-3166	3	5	by	by	ADP
fcis-3166	3	6	investigating	investigate	VERB
fcis-3166	3	7	the	the	DET
fcis-3166	3	8	current	current	ADJ
fcis-3166	3	9	research	research	NOUN
fcis-3166	3	10	status	status	NOUN
fcis-3166	3	11	of	of	ADP
fcis-3166	3	12	aero	aero	ADJ
fcis-3166	3	13	-	-	PUNCT
fcis-3166	3	14	engine	engine	NOUN
fcis-3166	3	15	gas	gas	NOUN
fcis-3166	3	16	film	film	NOUN
fcis-3166	3	17	hole	hole	NOUN
fcis-3166	3	18	machining	machining	NOUN
fcis-3166	3	19	at	at	ADP
fcis-3166	3	20	home	home	NOUN
fcis-3166	3	21	and	and	CCONJ
fcis-3166	3	22	abroad	abroad	ADV
fcis-3166	3	23	,	,	PUNCT
fcis-3166	3	24	the	the	DET
fcis-3166	3	25	characteristics	characteristic	NOUN
fcis-3166	3	26	and	and	CCONJ
fcis-3166	3	27	difficulties	difficulty	NOUN
fcis-3166	3	28	of	of	ADP
fcis-3166	3	29	the	the	DET
fcis-3166	3	30	current	current	ADJ
fcis-3166	3	31	gas	gas	NOUN
fcis-3166	3	32	film	film	NOUN
fcis-3166	3	33	hole	hole	NOUN
fcis-3166	3	34	machining	machining	NOUN
fcis-3166	3	35	are	be	AUX
fcis-3166	3	36	introduced	introduce	VERB
fcis-3166	3	37	,	,	PUNCT
fcis-3166	3	38	and	and	CCONJ
fcis-3166	3	39	the	the	DET
fcis-3166	3	40	comparison	comparison	NOUN
fcis-3166	3	41	between	between	ADP
fcis-3166	3	42	ordinary	ordinary	ADJ
fcis-3166	3	43	laser	laser	NOUN
fcis-3166	3	44	machining	machining	NOUN
fcis-3166	3	45	and	and	CCONJ
fcis-3166	3	46	femtosecond	femtosecond	NOUN
fcis-3166	3	47	laser	laser	NOUN
fcis-3166	3	48	machining	machining	NOUN
fcis-3166	3	49	is	be	AUX
fcis-3166	3	50	made	make	VERB
fcis-3166	3	51	.	.	PUNCT
fcis-3166	4	1	keywords	keyword	NOUN
fcis-3166	4	2	:	:	PUNCT
fcis-3166	4	3	air	air	NOUN
fcis-3166	4	4	film	film	NOUN
fcis-3166	4	5	;	;	PUNCT
fcis-3166	4	6	hole	hole	NOUN
fcis-3166	4	7	aerospace	aerospace	NOUN
fcis-3166	4	8	;	;	PUNCT
fcis-3166	4	9	process	process	NOUN
fcis-3166	4	10	.	.	PUNCT
fcis-3166	5	1	1	1	X
fcis-3166	5	2	.	.	X
fcis-3166	5	3	introduction	introduction	NOUN
fcis-3166	5	4	in	in	ADP
fcis-3166	5	5	recent	recent	ADJ
fcis-3166	5	6	years	year	NOUN
fcis-3166	5	7	,	,	PUNCT
fcis-3166	5	8	increasing	increase	VERB
fcis-3166	5	9	the	the	DET
fcis-3166	5	10	reliability	reliability	NOUN
fcis-3166	5	11	of	of	ADP
fcis-3166	5	12	high	high	ADJ
fcis-3166	5	13	temperature	temperature	NOUN
fcis-3166	5	14	operation	operation	NOUN
fcis-3166	5	15	and	and	CCONJ
fcis-3166	5	16	extending	extend	VERB
fcis-3166	5	17	the	the	DET
fcis-3166	5	18	service	service	NOUN
fcis-3166	5	19	life	life	NOUN
fcis-3166	5	20	have	have	AUX
fcis-3166	5	21	become	become	VERB
fcis-3166	5	22	the	the	DET
fcis-3166	5	23	focus	focus	NOUN
fcis-3166	5	24	of	of	ADP
fcis-3166	5	25	research	research	NOUN
fcis-3166	5	26	in	in	ADP
fcis-3166	5	27	the	the	DET
fcis-3166	5	28	field	field	NOUN
fcis-3166	5	29	of	of	ADP
fcis-3166	5	30	aero	aero	PROPN
fcis-3166	5	31	engine	engine	NOUN
fcis-3166	5	32	.	.	PUNCT
fcis-3166	6	1	turbine	turbine	NOUN
fcis-3166	6	2	is	be	AUX
fcis-3166	6	3	the	the	DET
fcis-3166	6	4	component	component	NOUN
fcis-3166	6	5	with	with	ADP
fcis-3166	6	6	the	the	DET
fcis-3166	6	7	largest	large	ADJ
fcis-3166	6	8	thermal	thermal	ADJ
fcis-3166	6	9	and	and	CCONJ
fcis-3166	6	10	mechanical	mechanical	ADJ
fcis-3166	6	11	load	load	NOUN
fcis-3166	6	12	of	of	ADP
fcis-3166	6	13	aero	aero	NOUN
fcis-3166	6	14	-	-	PUNCT
fcis-3166	6	15	engine	engine	NOUN
fcis-3166	6	16	,	,	PUNCT
fcis-3166	6	17	among	among	ADP
fcis-3166	6	18	which	which	PRON
fcis-3166	6	19	the	the	DET
fcis-3166	6	20	turbine	turbine	NOUN
fcis-3166	6	21	blade	blade	NOUN
fcis-3166	6	22	has	have	VERB
fcis-3166	6	23	a	a	DET
fcis-3166	6	24	particularly	particularly	ADV
fcis-3166	6	25	bad	bad	ADJ
fcis-3166	6	26	working	working	NOUN
fcis-3166	6	27	environment	environment	NOUN
fcis-3166	6	28	and	and	CCONJ
fcis-3166	6	29	is	be	AUX
fcis-3166	6	30	under	under	ADP
fcis-3166	6	31	the	the	DET
fcis-3166	6	32	impact	impact	NOUN
fcis-3166	6	33	of	of	ADP
fcis-3166	6	34	high	high	ADJ
fcis-3166	6	35	temperature	temperature	NOUN
fcis-3166	6	36	and	and	CCONJ
fcis-3166	6	37	high	high	ADJ
fcis-3166	6	38	-	-	PUNCT
fcis-3166	6	39	pressure	pressure	NOUN
fcis-3166	6	40	gas	gas	NOUN
fcis-3166	6	41	in	in	ADP
fcis-3166	6	42	the	the	DET
fcis-3166	6	43	working	working	NOUN
fcis-3166	6	44	process	process	NOUN
fcis-3166	6	45	.	.	PUNCT
fcis-3166	7	1	its	its	PRON
fcis-3166	7	2	processing	processing	NOUN
fcis-3166	7	3	technology	technology	NOUN
fcis-3166	7	4	has	have	AUX
fcis-3166	7	5	become	become	VERB
fcis-3166	7	6	the	the	DET
fcis-3166	7	7	key	key	ADJ
fcis-3166	7	8	technology	technology	NOUN
fcis-3166	7	9	of	of	ADP
fcis-3166	7	10	modern	modern	ADJ
fcis-3166	7	11	aero	aero	NOUN
fcis-3166	7	12	-	-	PUNCT
fcis-3166	7	13	engine	engine	NOUN
fcis-3166	7	14	.	.	PUNCT
fcis-3166	8	1	due	due	ADP
fcis-3166	8	2	to	to	ADP
fcis-3166	8	3	its	its	PRON
fcis-3166	8	4	material	material	NOUN
fcis-3166	8	5	characteristics	characteristic	NOUN
fcis-3166	8	6	,	,	PUNCT
fcis-3166	8	7	it	it	PRON
fcis-3166	8	8	is	be	AUX
fcis-3166	8	9	difficult	difficult	ADJ
fcis-3166	8	10	to	to	PART
fcis-3166	8	11	control	control	VERB
fcis-3166	8	12	the	the	DET
fcis-3166	8	13	temperature	temperature	NOUN
fcis-3166	8	14	of	of	ADP
fcis-3166	8	15	turbine	turbine	NOUN
fcis-3166	8	16	blades	blade	NOUN
fcis-3166	8	17	,	,	PUNCT
fcis-3166	8	18	which	which	PRON
fcis-3166	8	19	constantly	constantly	ADV
fcis-3166	8	20	rise	rise	VERB
fcis-3166	8	21	to	to	ADP
fcis-3166	8	22	the	the	DET
fcis-3166	8	23	melting	melting	NOUN
fcis-3166	8	24	point	point	NOUN
fcis-3166	8	25	of	of	ADP
fcis-3166	8	26	the	the	DET
fcis-3166	8	27	material	material	NOUN
fcis-3166	8	28	during	during	ADP
fcis-3166	8	29	operation	operation	NOUN
fcis-3166	8	30	.	.	PUNCT
fcis-3166	9	1	in	in	ADP
fcis-3166	9	2	order	order	NOUN
fcis-3166	9	3	to	to	PART
fcis-3166	9	4	make	make	VERB
fcis-3166	9	5	the	the	DET
fcis-3166	9	6	turbine	turbine	NOUN
fcis-3166	9	7	blades	blade	NOUN
fcis-3166	9	8	reach	reach	VERB
fcis-3166	9	9	the	the	DET
fcis-3166	9	10	melting	melting	NOUN
fcis-3166	9	11	point	point	NOUN
fcis-3166	9	12	of	of	ADP
fcis-3166	9	13	the	the	DET
fcis-3166	9	14	material	material	NOUN
fcis-3166	9	15	,	,	PUNCT
fcis-3166	9	16	the	the	DET
fcis-3166	9	17	engine	engine	NOUN
fcis-3166	9	18	can	can	AUX
fcis-3166	9	19	still	still	ADV
fcis-3166	9	20	work	work	VERB
fcis-3166	9	21	normally	normally	ADV
fcis-3166	9	22	,	,	PUNCT
fcis-3166	9	23	which	which	PRON
fcis-3166	9	24	gives	give	VERB
fcis-3166	9	25	rise	rise	NOUN
fcis-3166	9	26	to	to	ADP
fcis-3166	9	27	the	the	DET
fcis-3166	9	28	cooling	cool	VERB
fcis-3166	9	29	and	and	CCONJ
fcis-3166	9	30	cooling	cool	VERB
fcis-3166	9	31	technology	technology	NOUN
fcis-3166	9	32	,	,	PUNCT
fcis-3166	9	33	among	among	ADP
fcis-3166	9	34	which	which	PRON
fcis-3166	9	35	the	the	DET
fcis-3166	9	36	gas	gas	NOUN
fcis-3166	9	37	die	die	VERB
fcis-3166	9	38	hole	hole	NOUN
fcis-3166	9	39	cooling	cool	VERB
fcis-3166	9	40	technology	technology	NOUN
fcis-3166	9	41	is	be	AUX
fcis-3166	9	42	a	a	DET
fcis-3166	9	43	representative	representative	ADJ
fcis-3166	9	44	structural	structural	ADJ
fcis-3166	9	45	improvement	improvement	NOUN
fcis-3166	9	46	cooling	cool	VERB
fcis-3166	9	47	technology	technology	NOUN
fcis-3166	9	48	.	.	PUNCT
fcis-3166	10	1	during	during	ADP
fcis-3166	10	2	the	the	DET
fcis-3166	10	3	operation	operation	NOUN
fcis-3166	10	4	of	of	ADP
fcis-3166	10	5	aero	aero	NOUN
fcis-3166	10	6	-	-	PUNCT
fcis-3166	10	7	engine	engine	NOUN
fcis-3166	10	8	,	,	PUNCT
fcis-3166	10	9	air	air	NOUN
fcis-3166	10	10	evenly	evenly	ADV
fcis-3166	10	11	passes	pass	VERB
fcis-3166	10	12	through	through	ADP
fcis-3166	10	13	the	the	DET
fcis-3166	10	14	gas	gas	NOUN
fcis-3166	10	15	film	film	NOUN
fcis-3166	10	16	holes	hole	NOUN
fcis-3166	10	17	processed	process	VERB
fcis-3166	10	18	on	on	ADP
fcis-3166	10	19	turbine	turbine	NOUN
fcis-3166	10	20	blades	blade	NOUN
fcis-3166	10	21	.	.	PUNCT
fcis-3166	11	1	the	the	DET
fcis-3166	11	2	aperture	aperture	NOUN
fcis-3166	11	3	is	be	AUX
fcis-3166	11	4	usually	usually	ADV
fcis-3166	11	5	100	100	NUM
fcis-3166	11	6	-	-	PUNCT
fcis-3166	11	7	800μm	800μm	NOUN
fcis-3166	11	8	and	and	CCONJ
fcis-3166	11	9	the	the	DET
fcis-3166	11	10	angle	angle	NOUN
fcis-3166	11	11	is	be	AUX
fcis-3166	11	12	15	15	NUM
fcis-3166	11	13	-	-	SYM
fcis-3166	11	14	90	90	NUM
fcis-3166	11	15	°	°	NOUN
fcis-3166	11	16	,	,	PUNCT
fcis-3166	11	17	which	which	PRON
fcis-3166	11	18	can	can	AUX
fcis-3166	11	19	reduce	reduce	VERB
fcis-3166	11	20	the	the	DET
fcis-3166	11	21	temperature	temperature	NOUN
fcis-3166	11	22	of	of	ADP
fcis-3166	11	23	engine	engine	NOUN
fcis-3166	11	24	turbine	turbine	NOUN
fcis-3166	11	25	blades	blade	NOUN
fcis-3166	11	26	and	and	CCONJ
fcis-3166	11	27	improve	improve	VERB
fcis-3166	11	28	the	the	DET
fcis-3166	11	29	service	service	NOUN
fcis-3166	11	30	temperature	temperature	NOUN
fcis-3166	11	31	and	and	CCONJ
fcis-3166	11	32	service	service	NOUN
fcis-3166	11	33	life	life	NOUN
fcis-3166	11	34	of	of	ADP
fcis-3166	11	35	the	the	DET
fcis-3166	11	36	engine	engine	NOUN
fcis-3166	11	37	.	.	PUNCT
fcis-3166	12	1	in	in	ADP
fcis-3166	12	2	addition	addition	NOUN
fcis-3166	12	3	,	,	PUNCT
fcis-3166	12	4	as	as	SCONJ
fcis-3166	12	5	the	the	DET
fcis-3166	12	6	second	second	ADJ
fcis-3166	12	7	barrier	barrier	NOUN
fcis-3166	12	8	to	to	PART
fcis-3166	12	9	delay	delay	VERB
fcis-3166	12	10	the	the	DET
fcis-3166	12	11	ablation	ablation	NOUN
fcis-3166	12	12	of	of	ADP
fcis-3166	12	13	the	the	DET
fcis-3166	12	14	rear	rear	ADJ
fcis-3166	12	15	stage	stage	NOUN
fcis-3166	12	16	blades	blade	NOUN
fcis-3166	12	17	,	,	PUNCT
fcis-3166	12	18	the	the	DET
fcis-3166	12	19	design	design	NOUN
fcis-3166	12	20	of	of	ADP
fcis-3166	12	21	the	the	DET
fcis-3166	12	22	turbine	turbine	NOUN
fcis-3166	12	23	engine	engine	NOUN
fcis-3166	12	24	's	's	PART
fcis-3166	12	25	inshaft	inshaft	NOUN
fcis-3166	12	26	airway	airway	NOUN
fcis-3166	12	27	,	,	PUNCT
fcis-3166	12	28	in	in	ADP
fcis-3166	12	29	-	-	PUNCT
fcis-3166	12	30	blade	blade	NOUN
fcis-3166	12	31	airway	airway	NOUN
fcis-3166	12	32	and	and	CCONJ
fcis-3166	12	33	the	the	DET
fcis-3166	12	34	gas	gas	NOUN
fcis-3166	12	35	film	film	NOUN
fcis-3166	12	36	holes	hole	NOUN
fcis-3166	12	37	scattered	scatter	VERB
fcis-3166	12	38	on	on	ADP
fcis-3166	12	39	the	the	DET
fcis-3166	12	40	blade	blade	NOUN
fcis-3166	12	41	has	have	AUX
fcis-3166	12	42	always	always	ADV
fcis-3166	12	43	been	be	AUX
fcis-3166	12	44	the	the	DET
fcis-3166	12	45	research	research	NOUN
fcis-3166	12	46	focus	focus	NOUN
fcis-3166	12	47	of	of	ADP
fcis-3166	12	48	the	the	DET
fcis-3166	12	49	whole	whole	ADJ
fcis-3166	12	50	engine	engine	NOUN
fcis-3166	12	51	.	.	PUNCT
fcis-3166	13	1	in	in	ADP
fcis-3166	13	2	particular	particular	ADJ
fcis-3166	13	3	,	,	PUNCT
fcis-3166	13	4	the	the	DET
fcis-3166	13	5	design	design	NOUN
fcis-3166	13	6	of	of	ADP
fcis-3166	13	7	the	the	DET
fcis-3166	13	8	gas	gas	NOUN
fcis-3166	13	9	film	film	NOUN
fcis-3166	13	10	holes	hole	VERB
fcis-3166	13	11	directly	directly	ADV
fcis-3166	13	12	determines	determine	VERB
fcis-3166	13	13	the	the	DET
fcis-3166	13	14	key	key	ADJ
fcis-3166	13	15	performance	performance	NOUN
fcis-3166	13	16	of	of	ADP
fcis-3166	13	17	the	the	DET
fcis-3166	13	18	continuity	continuity	NOUN
fcis-3166	13	19	of	of	ADP
fcis-3166	13	20	the	the	DET
fcis-3166	13	21	gas	gas	NOUN
fcis-3166	13	22	film	film	NOUN
fcis-3166	13	23	,	,	PUNCT
fcis-3166	13	24	the	the	DET
fcis-3166	13	25	thermal	thermal	ADJ
fcis-3166	13	26	conductivity	conductivity	NOUN
fcis-3166	13	27	along	along	ADP
fcis-3166	13	28	the	the	DET
fcis-3166	13	29	curved	curved	ADJ
fcis-3166	13	30	surface	surface	NOUN
fcis-3166	13	31	normal	normal	ADJ
fcis-3166	13	32	and	and	CCONJ
fcis-3166	13	33	the	the	DET
fcis-3166	13	34	heat	heat	NOUN
fcis-3166	13	35	dissipation	dissipation	NOUN
fcis-3166	13	36	capacity	capacity	NOUN
fcis-3166	13	37	of	of	ADP
fcis-3166	13	38	the	the	DET
fcis-3166	13	39	flow	flow	NOUN
fcis-3166	13	40	field	field	NOUN
fcis-3166	13	41	.	.	PUNCT
fcis-3166	14	1	therefore	therefore	ADV
fcis-3166	14	2	,	,	PUNCT
fcis-3166	14	3	the	the	DET
fcis-3166	14	4	design	design	NOUN
fcis-3166	14	5	of	of	ADP
fcis-3166	14	6	air	air	NOUN
fcis-3166	14	7	film	film	NOUN
fcis-3166	14	8	holes	hole	NOUN
fcis-3166	14	9	becomes	become	VERB
fcis-3166	14	10	more	more	ADV
fcis-3166	14	11	and	and	CCONJ
fcis-3166	14	12	more	more	ADV
fcis-3166	14	13	complicated	complicated	ADJ
fcis-3166	14	14	.	.	PUNCT
fcis-3166	15	1	however	however	ADV
fcis-3166	15	2	,	,	PUNCT
fcis-3166	15	3	according	accord	VERB
fcis-3166	15	4	to	to	ADP
fcis-3166	15	5	the	the	DET
fcis-3166	15	6	investigation	investigation	NOUN
fcis-3166	15	7	of	of	ADP
fcis-3166	15	8	relevant	relevant	ADJ
fcis-3166	15	9	researchers	researcher	NOUN
fcis-3166	15	10	,	,	PUNCT
fcis-3166	15	11	the	the	DET
fcis-3166	15	12	current	current	ADJ
fcis-3166	15	13	speed	speed	NOUN
fcis-3166	15	14	of	of	ADP
fcis-3166	15	15	the	the	DET
fcis-3166	15	16	improvement	improvement	NOUN
fcis-3166	15	17	of	of	ADP
fcis-3166	15	18	the	the	DET
fcis-3166	15	19	processing	processing	NOUN
fcis-3166	15	20	level	level	NOUN
fcis-3166	15	21	of	of	ADP
fcis-3166	15	22	the	the	DET
fcis-3166	15	23	gas	gas	NOUN
fcis-3166	15	24	film	film	NOUN
fcis-3166	15	25	hole	hole	NOUN
fcis-3166	15	26	can	can	AUX
fcis-3166	15	27	not	not	PART
fcis-3166	15	28	keep	keep	VERB
fcis-3166	15	29	up	up	ADP
fcis-3166	15	30	with	with	ADP
fcis-3166	15	31	the	the	DET
fcis-3166	15	32	speed	speed	NOUN
fcis-3166	15	33	of	of	ADP
fcis-3166	15	34	the	the	DET
fcis-3166	15	35	development	development	NOUN
fcis-3166	15	36	of	of	ADP
fcis-3166	15	37	the	the	DET
fcis-3166	15	38	gas	gas	NOUN
fcis-3166	15	39	film	film	NOUN
fcis-3166	15	40	hole	hole	NOUN
fcis-3166	15	41	design	design	NOUN
fcis-3166	15	42	,	,	PUNCT
fcis-3166	15	43	which	which	PRON
fcis-3166	15	44	is	be	AUX
fcis-3166	15	45	one	one	NUM
fcis-3166	15	46	of	of	ADP
fcis-3166	15	47	the	the	DET
fcis-3166	15	48	bottlenecks	bottleneck	NOUN
fcis-3166	15	49	hindering	hinder	VERB
fcis-3166	15	50	the	the	DET
fcis-3166	15	51	rapid	rapid	ADJ
fcis-3166	15	52	development	development	NOUN
fcis-3166	15	53	of	of	ADP
fcis-3166	15	54	domestic	domestic	ADJ
fcis-3166	15	55	engines	engine	NOUN
fcis-3166	15	56	.	.	PUNCT
fcis-3166	16	1	therefore	therefore	ADV
fcis-3166	16	2	,	,	PUNCT
fcis-3166	16	3	the	the	DET
fcis-3166	16	4	processing	processing	NOUN
fcis-3166	16	5	technology	technology	NOUN
fcis-3166	16	6	of	of	ADP
fcis-3166	16	7	the	the	DET
fcis-3166	16	8	gas	gas	NOUN
fcis-3166	16	9	die	die	VERB
fcis-3166	16	10	hole	hole	NOUN
fcis-3166	16	11	needs	need	NOUN
fcis-3166	16	12	to	to	PART
fcis-3166	16	13	be	be	AUX
fcis-3166	16	14	further	far	ADV
fcis-3166	16	15	studied	study	VERB
fcis-3166	16	16	.	.	PUNCT
fcis-3166	17	1	2	2	X
fcis-3166	17	2	.	.	X
fcis-3166	17	3	overview	overview	NOUN
fcis-3166	17	4	of	of	ADP
fcis-3166	17	5	working	working	NOUN
fcis-3166	17	6	conditions	condition	NOUN
fcis-3166	17	7	and	and	CCONJ
fcis-3166	17	8	temperature	temperature	NOUN
fcis-3166	17	9	protection	protection	NOUN
fcis-3166	17	10	mechanism	mechanism	NOUN
fcis-3166	17	11	of	of	ADP
fcis-3166	17	12	post	post	ADJ
fcis-3166	17	13	-	-	ADJ
fcis-3166	17	14	flight	flight	ADJ
fcis-3166	17	15	blades	blade	NOUN
fcis-3166	17	16	2.1	2.1	NUM
fcis-3166	17	17	.	.	PUNCT
fcis-3166	18	1	research	research	NOUN
fcis-3166	18	2	on	on	ADP
fcis-3166	18	3	the	the	DET
fcis-3166	18	4	highest	high	ADJ
fcis-3166	18	5	level	level	NOUN
fcis-3166	18	6	of	of	ADP
fcis-3166	18	7	shipping	shipping	NOUN
fcis-3166	18	8	at	at	ADP
fcis-3166	18	9	home	home	NOUN
fcis-3166	18	10	and	and	CCONJ
fcis-3166	18	11	abroad	abroad	ADV
fcis-3166	18	12	at	at	ADP
fcis-3166	18	13	the	the	DET
fcis-3166	18	14	present	present	ADJ
fcis-3166	18	15	stage	stage	NOUN
fcis-3166	18	16	,	,	PUNCT
fcis-3166	18	17	china	china	PROPN
fcis-3166	18	18	's	's	PART
fcis-3166	18	19	fifth	fifth	ADJ
fcis-3166	18	20	-	-	PUNCT
fcis-3166	18	21	generation	generation	NOUN
fcis-3166	18	22	fighter	fighter	NOUN
fcis-3166	18	23	jets	jet	NOUN
fcis-3166	18	24	have	have	AUX
fcis-3166	18	25	been	be	AUX
fcis-3166	18	26	installed	instal	VERB
fcis-3166	18	27	on	on	ADP
fcis-3166	18	28	a	a	DET
fcis-3166	18	29	certain	certain	ADJ
fcis-3166	18	30	scale	scale	NOUN
fcis-3166	18	31	.	.	PUNCT
fcis-3166	19	1	however	however	ADV
fcis-3166	19	2	,	,	PUNCT
fcis-3166	19	3	many	many	ADJ
fcis-3166	19	4	problems	problem	NOUN
fcis-3166	19	5	of	of	ADP
fcis-3166	19	6	the	the	DET
fcis-3166	19	7	military	military	ADJ
fcis-3166	19	8	turbojet	turbojet	NOUN
fcis-3166	19	9	engine	engine	NOUN
fcis-3166	19	10	,	,	PUNCT
fcis-3166	19	11	which	which	PRON
fcis-3166	19	12	is	be	AUX
fcis-3166	19	13	the	the	DET
fcis-3166	19	14	heart	heart	NOUN
fcis-3166	19	15	of	of	ADP
fcis-3166	19	16	the	the	DET
fcis-3166	19	17	fighter	fighter	NOUN
fcis-3166	19	18	jets	jet	NOUN
fcis-3166	19	19	,	,	PUNCT
fcis-3166	19	20	have	have	AUX
fcis-3166	19	21	not	not	PART
fcis-3166	19	22	been	be	AUX
fcis-3166	19	23	solved	solve	VERB
fcis-3166	19	24	.	.	PUNCT
fcis-3166	20	1	as	as	ADP
fcis-3166	20	2	a	a	DET
fcis-3166	20	3	result	result	NOUN
fcis-3166	20	4	,	,	PUNCT
fcis-3166	20	5	china	china	PROPN
fcis-3166	20	6	imports	import	VERB
fcis-3166	20	7	more	more	ADJ
fcis-3166	20	8	than	than	ADP
fcis-3166	20	9	200	200	NUM
fcis-3166	20	10	jet	jet	NOUN
fcis-3166	20	11	engines	engine	NOUN
fcis-3166	20	12	from	from	ADP
fcis-3166	20	13	russia	russia	PROPN
fcis-3166	20	14	and	and	CCONJ
fcis-3166	20	15	ukraine	ukraine	NOUN
fcis-3166	20	16	every	every	DET
fcis-3166	20	17	year	year	NOUN
fcis-3166	20	18	.	.	PUNCT
fcis-3166	21	1	however	however	ADV
fcis-3166	21	2	,	,	PUNCT
fcis-3166	21	3	there	there	PRON
fcis-3166	21	4	is	be	VERB
fcis-3166	21	5	still	still	ADV
fcis-3166	21	6	a	a	DET
fcis-3166	21	7	big	big	ADJ
fcis-3166	21	8	gap	gap	NOUN
fcis-3166	21	9	between	between	ADP
fcis-3166	21	10	the	the	DET
fcis-3166	21	11	performance	performance	NOUN
fcis-3166	21	12	of	of	ADP
fcis-3166	21	13	imported	import	VERB
fcis-3166	21	14	engines	engine	NOUN
fcis-3166	21	15	and	and	CCONJ
fcis-3166	21	16	those	those	PRON
fcis-3166	21	17	equipped	equip	VERB
fcis-3166	21	18	in	in	ADP
fcis-3166	21	19	western	western	ADJ
fcis-3166	21	20	countries	country	NOUN
fcis-3166	21	21	.	.	PUNCT
fcis-3166	22	1	in	in	ADP
fcis-3166	22	2	today	today	NOUN
fcis-3166	22	3	's	's	PART
fcis-3166	22	4	world	world	NOUN
fcis-3166	22	5	,	,	PUNCT
fcis-3166	22	6	the	the	DET
fcis-3166	22	7	fourth	fourth	ADJ
fcis-3166	22	8	and	and	CCONJ
fcis-3166	22	9	fifth	fifth	ADJ
fcis-3166	22	10	generation	generation	NOUN
fcis-3166	22	11	fighter	fighter	NOUN
fcis-3166	22	12	jets	jet	NOUN
fcis-3166	22	13	have	have	AUX
fcis-3166	22	14	long	long	ADV
fcis-3166	22	15	been	be	AUX
fcis-3166	22	16	the	the	DET
fcis-3166	22	17	standard	standard	ADJ
fcis-3166	22	18	equipment	equipment	NOUN
fcis-3166	22	19	of	of	ADP
fcis-3166	22	20	all	all	DET
fcis-3166	22	21	-	-	PUNCT
fcis-3166	22	22	powerful	powerful	ADJ
fcis-3166	22	23	countries	country	NOUN
fcis-3166	22	24	,	,	PUNCT
fcis-3166	22	25	and	and	CCONJ
fcis-3166	22	26	the	the	DET
fcis-3166	22	27	fifth	fifth	ADJ
fcis-3166	22	28	-	-	PUNCT
fcis-3166	22	29	generation	generation	NOUN
fcis-3166	22	30	fighter	fighter	NOUN
fcis-3166	22	31	jets	jet	NOUN
fcis-3166	22	32	have	have	VERB
fcis-3166	22	33	great	great	ADJ
fcis-3166	22	34	tactical	tactical	ADJ
fcis-3166	22	35	advantages	advantage	NOUN
fcis-3166	22	36	over	over	ADP
fcis-3166	22	37	the	the	DET
fcis-3166	22	38	fourth	fourth	ADJ
fcis-3166	22	39	-	-	PUNCT
fcis-3166	22	40	generation	generation	NOUN
fcis-3166	22	41	fighter	fighter	NOUN
fcis-3166	22	42	jets	jet	NOUN
fcis-3166	22	43	due	due	ADP
fcis-3166	22	44	to	to	ADP
fcis-3166	22	45	its	its	PRON
fcis-3166	22	46	"	"	PUNCT
fcis-3166	22	47	4s	4s	NUM
fcis-3166	22	48	"	"	PUNCT
fcis-3166	22	49	performance	performance	NOUN
fcis-3166	22	50	.	.	PUNCT
fcis-3166	23	1	however	however	ADV
fcis-3166	23	2	,	,	PUNCT
fcis-3166	23	3	watching	watch	VERB
fcis-3166	23	4	the	the	DET
fcis-3166	23	5	nato	nato	PROPN
fcis-3166	23	6	military	military	NOUN
fcis-3166	23	7	exercises	exercise	NOUN
fcis-3166	23	8	,	,	PUNCT
fcis-3166	23	9	it	it	PRON
fcis-3166	23	10	is	be	AUX
fcis-3166	23	11	not	not	PART
fcis-3166	23	12	difficult	difficult	ADJ
fcis-3166	23	13	to	to	PART
fcis-3166	23	14	find	find	VERB
fcis-3166	23	15	that	that	SCONJ
fcis-3166	23	16	the	the	DET
fcis-3166	23	17	pilots	pilot	NOUN
fcis-3166	23	18	of	of	ADP
fcis-3166	23	19	some	some	DET
fcis-3166	23	20	traditional	traditional	ADJ
fcis-3166	23	21	european	european	ADJ
fcis-3166	23	22	powers	power	NOUN
fcis-3166	23	23	equipped	equip	VERB
fcis-3166	23	24	with	with	ADP
fcis-3166	23	25	highperformance	highperformance	NOUN
fcis-3166	23	26	fourth	fourth	ADJ
fcis-3166	23	27	-	-	PUNCT
fcis-3166	23	28	generation	generation	NOUN
fcis-3166	23	29	aircraft	aircraft	NOUN
fcis-3166	23	30	often	often	ADV
fcis-3166	23	31	exert	exert	VERB
fcis-3166	23	32	the	the	DET
fcis-3166	23	33	maneuverability	maneuverability	NOUN
fcis-3166	23	34	advantage	advantage	NOUN
fcis-3166	23	35	of	of	ADP
fcis-3166	23	36	fourth	fourth	ADJ
fcis-3166	23	37	-	-	PUNCT
fcis-3166	23	38	generation	generation	NOUN
fcis-3166	23	39	aircraft	aircraft	NOUN
fcis-3166	23	40	to	to	ADP
fcis-3166	23	41	the	the	DET
fcis-3166	23	42	extreme	extreme	NOUN
fcis-3166	23	43	,	,	PUNCT
fcis-3166	23	44	and	and	CCONJ
fcis-3166	23	45	successfully	successfully	ADV
fcis-3166	23	46	suppress	suppress	VERB
fcis-3166	23	47	the	the	DET
fcis-3166	23	48	advanced	advanced	ADJ
fcis-3166	23	49	fifthgeneration	fifthgeneration	NOUN
fcis-3166	23	50	aircraft	aircraft	NOUN
fcis-3166	23	51	of	of	ADP
fcis-3166	23	52	the	the	DET
fcis-3166	23	53	united	united	PROPN
fcis-3166	23	54	states	states	PROPN
fcis-3166	23	55	f22	f22	PROPN
fcis-3166	23	56	.	.	PUNCT
fcis-3166	24	1	"	"	PUNCT
fcis-3166	24	2	breaking	break	VERB
fcis-3166	24	3	the	the	DET
fcis-3166	24	4	sound	sound	ADJ
fcis-3166	24	5	barrier	barrier	NOUN
fcis-3166	24	6	is	be	AUX
fcis-3166	24	7	not	not	PART
fcis-3166	24	8	in	in	ADP
fcis-3166	24	9	the	the	DET
fcis-3166	24	10	senses	sense	NOUN
fcis-3166	24	11	,	,	PUNCT
fcis-3166	24	12	it	it	PRON
fcis-3166	24	13	's	be	AUX
fcis-3166	24	14	just	just	ADV
fcis-3166	24	15	a	a	DET
fcis-3166	24	16	number	number	NOUN
fcis-3166	24	17	that	that	PRON
fcis-3166	24	18	rises	rise	VERB
fcis-3166	24	19	rapidly	rapidly	ADV
fcis-3166	24	20	"	"	PUNCT
fcis-3166	24	21	-the	-the	DET
fcis-3166	24	22	young	young	PROPN
fcis-3166	24	23	rafale	rafale	PROPN
fcis-3166	24	24	driver	driver	NOUN
fcis-3166	24	25	.	.	PUNCT
fcis-3166	25	1	the	the	DET
fcis-3166	25	2	first	first	ADJ
fcis-3166	25	3	emphasis	emphasis	NOUN
fcis-3166	25	4	on	on	ADP
fcis-3166	25	5	performance	performance	NOUN
fcis-3166	25	6	of	of	ADP
fcis-3166	25	7	the	the	DET
fcis-3166	25	8	fifth	fifth	ADJ
fcis-3166	25	9	generation	generation	NOUN
fcis-3166	25	10	,	,	PUNCT
fcis-3166	25	11	and	and	CCONJ
fcis-3166	25	12	even	even	ADV
fcis-3166	25	13	the	the	DET
fcis-3166	25	14	next	next	ADJ
fcis-3166	25	15	six	six	NUM
fcis-3166	25	16	generations	generation	NOUN
fcis-3166	25	17	,	,	PUNCT
fcis-3166	25	18	must	must	AUX
fcis-3166	25	19	be	be	AUX
fcis-3166	25	20	"	"	PUNCT
fcis-3166	25	21	high	high	ADJ
fcis-3166	25	22	mobility	mobility	NOUN
fcis-3166	25	23	"	"	PUNCT
fcis-3166	25	24	.	.	PUNCT
fcis-3166	26	1	this	this	PRON
fcis-3166	26	2	puts	put	VERB
fcis-3166	26	3	ever	ever	ADV
fcis-3166	26	4	greater	great	ADJ
fcis-3166	26	5	demands	demand	NOUN
fcis-3166	26	6	on	on	ADP
fcis-3166	26	7	the	the	DET
fcis-3166	26	8	thrust	thrust	VERB
fcis-3166	26	9	-	-	PUNCT
fcis-3166	26	10	to	to	ADP
fcis-3166	26	11	-	-	PUNCT
fcis-3166	26	12	weight	weight	NOUN
fcis-3166	26	13	ratio	ratio	NOUN
fcis-3166	26	14	that	that	PRON
fcis-3166	26	15	the	the	DET
fcis-3166	26	16	engine	engine	NOUN
fcis-3166	26	17	can	can	AUX
fcis-3166	26	18	produce	produce	VERB
fcis-3166	26	19	,	,	PUNCT
fcis-3166	26	20	which	which	PRON
fcis-3166	26	21	means	mean	VERB
fcis-3166	26	22	that	that	SCONJ
fcis-3166	26	23	new	new	ADJ
fcis-3166	26	24	engines	engine	NOUN
fcis-3166	26	25	will	will	AUX
fcis-3166	26	26	have	have	VERB
fcis-3166	26	27	to	to	PART
fcis-3166	26	28	withstand	withstand	VERB
fcis-3166	26	29	ever	ever	ADV
fcis-3166	26	30	higher	high	ADJ
fcis-3166	26	31	core	core	NOUN
fcis-3166	26	32	temperatures	temperature	NOUN
fcis-3166	26	33	.	.	PUNCT
fcis-3166	27	1	at	at	ADP
fcis-3166	27	2	present	present	ADJ
fcis-3166	27	3	,	,	PUNCT
fcis-3166	27	4	the	the	DET
fcis-3166	27	5	self	self	NOUN
fcis-3166	27	6	-	-	PUNCT
fcis-3166	27	7	produced	produce	VERB
fcis-3166	27	8	fighter	fighter	NOUN
fcis-3166	27	9	engine	engine	NOUN
fcis-3166	27	10	is	be	AUX
fcis-3166	27	11	still	still	ADV
fcis-3166	27	12	in	in	ADP
fcis-3166	27	13	the	the	DET
fcis-3166	27	14	level	level	NOUN
fcis-3166	27	15	of	of	ADP
fcis-3166	27	16	blade	blade	NOUN
fcis-3166	27	17	working	work	VERB
fcis-3166	27	18	temperature	temperature	NOUN
fcis-3166	27	19	around	around	ADP
fcis-3166	27	20	1350	1350	NUM
fcis-3166	27	21	℃	℃	PROPN
fcis-3166	27	22	and	and	CCONJ
fcis-3166	27	23	combustor	combustor	NOUN
fcis-3166	27	24	temperature	temperature	NOUN
fcis-3166	27	25	below	below	ADP
fcis-3166	27	26	1800	1800	NUM
fcis-3166	27	27	℃	℃	PROPN
fcis-3166	27	28	(	(	PUNCT
fcis-3166	27	29	austenitic	austenitic	ADJ
fcis-3166	27	30	nickel	nickel	NOUN
fcis-3166	27	31	and	and	CCONJ
fcis-3166	27	32	cobaltbased	cobaltbase	VERB
fcis-3166	27	33	alloy	alloy	NOUN
fcis-3166	27	34	)	)	PUNCT
fcis-3166	27	35	.	.	PUNCT
fcis-3166	28	1	although	although	SCONJ
fcis-3166	28	2	the	the	DET
fcis-3166	28	3	blade	blade	NOUN
fcis-3166	28	4	can	can	AUX
fcis-3166	28	5	withstand	withstand	VERB
fcis-3166	28	6	the	the	DET
fcis-3166	28	7	surface	surface	NOUN
fcis-3166	28	8	afterburning	afterburning	NOUN
fcis-3166	28	9	mode	mode	NOUN
fcis-3166	28	10	of	of	ADP
fcis-3166	28	11	1500	1500	NUM
fcis-3166	28	12	℃	℃	PROPN
fcis-3166	28	13	for	for	ADP
fcis-3166	28	14	a	a	DET
fcis-3166	28	15	certain	certain	ADJ
fcis-3166	28	16	period	period	NOUN
fcis-3166	28	17	of	of	ADP
fcis-3166	28	18	time	time	NOUN
fcis-3166	28	19	,	,	PUNCT
fcis-3166	28	20	it	it	PRON
fcis-3166	28	21	will	will	AUX
fcis-3166	28	22	greatly	greatly	ADV
fcis-3166	28	23	shorten	shorten	VERB
fcis-3166	28	24	the	the	DET
fcis-3166	28	25	service	service	NOUN
fcis-3166	28	26	life	life	NOUN
fcis-3166	28	27	.	.	PUNCT
fcis-3166	29	1	it	it	PRON
fcis-3166	29	2	can	can	AUX
fcis-3166	29	3	not	not	PART
fcis-3166	29	4	meet	meet	VERB
fcis-3166	29	5	the	the	DET
fcis-3166	29	6	requirements	requirement	NOUN
fcis-3166	29	7	of	of	ADP
fcis-3166	29	8	"	"	PUNCT
fcis-3166	29	9	supersonic	supersonic	ADJ
fcis-3166	29	10	cruise	cruise	NOUN
fcis-3166	29	11	"	"	PUNCT
fcis-3166	29	12	and	and	CCONJ
fcis-3166	29	13	high	high	ADJ
fcis-3166	29	14	mobility	mobility	NOUN
fcis-3166	29	15	and	and	CCONJ
fcis-3166	29	16	large	large	ADJ
fcis-3166	29	17	thrust	thrust	NOUN
fcis-3166	29	18	.	.	PUNCT
fcis-3166	30	1	the	the	DET
fcis-3166	30	2	united	united	PROPN
fcis-3166	30	3	states	states	PROPN
fcis-3166	30	4	has	have	AUX
fcis-3166	30	5	developed	develop	VERB
fcis-3166	30	6	ceramic	ceramic	ADJ
fcis-3166	30	7	matrix	matrix	NOUN
fcis-3166	30	8	composite	composite	ADJ
fcis-3166	30	9	material	material	NOUN
fcis-3166	30	10	with	with	ADP
fcis-3166	30	11	a	a	DET
fcis-3166	30	12	rated	rate	VERB
fcis-3166	30	13	operating	operating	NOUN
fcis-3166	30	14	temperature	temperature	NOUN
fcis-3166	30	15	of	of	ADP
fcis-3166	30	16	1538	1538	NUM
fcis-3166	30	17	℃	℃	PROPN
fcis-3166	30	18	,	,	PUNCT
fcis-3166	30	19	whose	whose	DET
fcis-3166	30	20	material	material	NOUN
fcis-3166	30	21	density	density	NOUN
fcis-3166	30	22	can	can	AUX
fcis-3166	30	23	support	support	VERB
fcis-3166	30	24	the	the	DET
fcis-3166	30	25	improvement	improvement	NOUN
fcis-3166	30	26	of	of	ADP
fcis-3166	30	27	the	the	DET
fcis-3166	30	28	overall	overall	ADJ
fcis-3166	30	29	performance	performance	NOUN
fcis-3166	30	30	of	of	ADP
fcis-3166	30	31	engine	engine	NOUN
fcis-3166	30	32	design	design	NOUN
fcis-3166	30	33	speed	speed	NOUN
fcis-3166	30	34	and	and	CCONJ
fcis-3166	30	35	so	so	ADV
fcis-3166	30	36	on	on	ADV
fcis-3166	30	37	.	.	PUNCT
fcis-3166	31	1	moreover	moreover	ADV
fcis-3166	31	2	,	,	PUNCT
fcis-3166	31	3	the	the	DET
fcis-3166	31	4	pratt	pratt	PROPN
fcis-3166	31	5	&	&	CCONJ
fcis-3166	31	6	whitney	whitney	PROPN
fcis-3166	31	7	f135	f135	PROPN
fcis-3166	31	8	engine	engine	NOUN
fcis-3166	31	9	equipped	equip	VERB
fcis-3166	31	10	with	with	ADP
fcis-3166	31	11	87	87	NUM
fcis-3166	31	12	f35	f35	NOUN
fcis-3166	31	13	fighter	fighter	NOUN
fcis-3166	31	14	jets	jet	NOUN
fcis-3166	31	15	has	have	AUX
fcis-3166	31	16	become	become	VERB
fcis-3166	31	17	the	the	DET
fcis-3166	31	18	most	most	ADV
fcis-3166	31	19	advanced	advanced	ADJ
fcis-3166	31	20	engine	engine	NOUN
fcis-3166	31	21	in	in	ADP
fcis-3166	31	22	the	the	DET
fcis-3166	31	23	world	world	NOUN
fcis-3166	31	24	.	.	PUNCT
fcis-3166	32	1	fig1	fig1	PROPN
fcis-3166	32	2	shows	show	VERB
fcis-3166	32	3	the	the	DET
fcis-3166	32	4	structure	structure	NOUN
fcis-3166	32	5	of	of	ADP
fcis-3166	32	6	a	a	DET
fcis-3166	32	7	modern	modern	ADJ
fcis-3166	32	8	civil	civil	ADJ
fcis-3166	32	9	turbofan	turbofan	NOUN
fcis-3166	32	10	engine	engine	NOUN
fcis-3166	32	11	fig	fig	NOUN
fcis-3166	32	12	.	.	PUNCT
fcis-3166	33	1	1	1	NUM
fcis-3166	33	2	structure	structure	NOUN
fcis-3166	33	3	diagram	diagram	NOUN
fcis-3166	33	4	of	of	ADP
fcis-3166	33	5	a	a	DET
fcis-3166	33	6	modern	modern	ADJ
fcis-3166	33	7	civil	civil	ADJ
fcis-3166	33	8	turbofan	turbofan	NOUN
fcis-3166	33	9	engine	engine	NOUN
fcis-3166	33	10	2.2	2.2	NUM
fcis-3166	33	11	.	.	PUNCT
fcis-3166	34	1	an	an	DET
fcis-3166	34	2	overview	overview	NOUN
fcis-3166	34	3	of	of	ADP
fcis-3166	34	4	the	the	DET
fcis-3166	34	5	force	force	NOUN
fcis-3166	34	6	on	on	ADP
fcis-3166	34	7	the	the	DET
fcis-3166	34	8	rear	rear	ADJ
fcis-3166	34	9	blade	blade	NOUN
fcis-3166	34	10	at	at	ADP
fcis-3166	34	11	work	work	NOUN
fcis-3166	34	12	in	in	ADP
fcis-3166	34	13	the	the	DET
fcis-3166	34	14	process	process	NOUN
fcis-3166	34	15	of	of	ADP
fcis-3166	34	16	aero	aero	PROPN
fcis-3166	34	17	operation	operation	NOUN
fcis-3166	34	18	,	,	PUNCT
fcis-3166	34	19	the	the	DET
fcis-3166	34	20	rear	rear	ADJ
fcis-3166	34	21	blade	blade	NOUN
fcis-3166	34	22	is	be	AUX
fcis-3166	34	23	mainly	mainly	ADV
fcis-3166	34	24	subjected	subject	VERB
fcis-3166	34	25	to	to	ADP
fcis-3166	34	26	the	the	DET
fcis-3166	34	27	tension	tension	NOUN
fcis-3166	34	28	along	along	ADP
fcis-3166	34	29	the	the	DET
fcis-3166	34	30	axial	axial	ADJ
fcis-3166	34	31	direction	direction	NOUN
fcis-3166	34	32	,	,	PUNCT
fcis-3166	34	33	the	the	DET
fcis-3166	34	34	airflow	airflow	NOUN
fcis-3166	34	35	thrust	thrust	NOUN
fcis-3166	34	36	along	along	ADP
fcis-3166	34	37	the	the	DET
fcis-3166	34	38	concave	concave	ADJ
fcis-3166	34	39	normal	normal	ADJ
fcis-3166	34	40	direction	direction	NOUN
fcis-3166	34	41	,	,	PUNCT
fcis-3166	34	42	and	and	CCONJ
fcis-3166	34	43	the	the	DET
fcis-3166	34	44	high	high	ADJ
fcis-3166	34	45	frequency	frequency	NOUN
fcis-3166	34	46	impact	impact	NOUN
fcis-3166	34	47	load	load	NOUN
fcis-3166	34	48	caused	cause	VERB
fcis-3166	34	49	by	by	ADP
fcis-3166	34	50	the	the	DET
fcis-3166	34	51	temporary	temporary	ADJ
fcis-3166	34	52	negative	negative	ADJ
fcis-3166	34	53	pressure	pressure	NOUN
fcis-3166	34	54	when	when	SCONJ
fcis-3166	34	55	the	the	DET
fcis-3166	34	56	blades	blade	NOUN
fcis-3166	34	57	on	on	ADP
fcis-3166	34	58	the	the	DET
fcis-3166	34	59	fixed	fix	VERB
fcis-3166	34	60	rotor	rotor	NOUN
fcis-3166	34	61	and	and	CCONJ
fcis-3166	34	62	the	the	DET
fcis-3166	34	63	moving	move	VERB
fcis-3166	34	64	rotor	rotor	NOUN
fcis-3166	34	65	alternate	alternate	NOUN
fcis-3166	34	66	each	each	DET
fcis-3166	34	67	time	time	NOUN
fcis-3166	34	68	.	.	PUNCT
fcis-3166	35	1	the	the	DET
fcis-3166	35	2	first	first	ADJ
fcis-3166	35	3	two	two	NUM
fcis-3166	35	4	will	will	AUX
fcis-3166	35	5	participate	participate	VERB
fcis-3166	35	6	in	in	ADP
fcis-3166	35	7	the	the	DET
fcis-3166	35	8	interaction	interaction	NOUN
fcis-3166	35	9	with	with	ADP
fcis-3166	35	10	high	high	ADJ
fcis-3166	35	11	temperature	temperature	NOUN
fcis-3166	35	12	creep	creep	NOUN
fcis-3166	35	13	,	,	PUNCT
fcis-3166	35	14	and	and	CCONJ
fcis-3166	35	15	the	the	DET
fcis-3166	35	16	latter	latter	ADJ
fcis-3166	35	17	can	can	AUX
fcis-3166	35	18	generally	generally	ADV
fcis-3166	35	19	be	be	AUX
fcis-3166	35	20	greatly	greatly	ADV
fcis-3166	35	21	weakened	weaken	VERB
fcis-3166	35	22	by	by	ADP
fcis-3166	35	23	optimized	optimize	VERB
fcis-3166	35	24	flow	flow	NOUN
fcis-3166	35	25	field	field	NOUN
fcis-3166	35	26	design	design	NOUN
fcis-3166	35	27	,	,	PUNCT
fcis-3166	35	28	but	but	CCONJ
fcis-3166	35	29	it	it	PRON
fcis-3166	35	30	always	always	ADV
fcis-3166	35	31	exists	exist	VERB
fcis-3166	35	32	.	.	PUNCT
fcis-3166	36	1	fig2	fig2	PROPN
fcis-3166	36	2	shows	show	VERB
fcis-3166	36	3	the	the	DET
fcis-3166	36	4	appearance	appearance	NOUN
fcis-3166	36	5	and	and	CCONJ
fcis-3166	36	6	internal	internal	ADJ
fcis-3166	36	7	structure	structure	NOUN
fcis-3166	36	8	of	of	ADP
fcis-3166	36	9	the	the	DET
fcis-3166	36	10	turbojet	turbojet	NOUN
fcis-3166	36	11	engine	engine	NOUN
fcis-3166	36	12	.	.	PUNCT
fcis-3166	37	1	it	it	PRON
fcis-3166	37	2	can	can	AUX
fcis-3166	37	3	be	be	AUX
fcis-3166	37	4	seen	see	VERB
fcis-3166	37	5	that	that	SCONJ
fcis-3166	37	6	both	both	CCONJ
fcis-3166	37	7	the	the	DET
fcis-3166	37	8	ribbed	ribbed	NOUN
fcis-3166	37	9	structure	structure	NOUN
fcis-3166	37	10	and	and	CCONJ
fcis-3166	37	11	the	the	DET
fcis-3166	37	12	die	die	NOUN
fcis-3166	37	13	hole	hole	NOUN
fcis-3166	37	14	in	in	ADP
fcis-3166	37	15	the	the	DET
fcis-3166	37	16	blade	blade	NOUN
fcis-3166	37	17	will	will	AUX
fcis-3166	37	18	cause	cause	VERB
fcis-3166	37	19	stress	stress	NOUN
fcis-3166	37	20	concentration	concentration	NOUN
fcis-3166	37	21	during	during	ADP
fcis-3166	37	22	the	the	DET
fcis-3166	37	23	loading	loading	NOUN
fcis-3166	37	24	process	process	NOUN
fcis-3166	37	25	of	of	ADP
fcis-3166	37	26	the	the	DET
fcis-3166	37	27	above	above	ADJ
fcis-3166	37	28	stresses	stress	NOUN
fcis-3166	37	29	,	,	PUNCT
fcis-3166	37	30	and	and	CCONJ
fcis-3166	37	31	how	how	SCONJ
fcis-3166	37	32	to	to	PART
fcis-3166	37	33	reduce	reduce	VERB
fcis-3166	37	34	the	the	DET
fcis-3166	37	35	harm	harm	NOUN
fcis-3166	37	36	of	of	ADP
fcis-3166	37	37	these	these	DET
fcis-3166	37	38	stress	stress	NOUN
fcis-3166	37	39	concentrations	concentration	NOUN
fcis-3166	37	40	is	be	AUX
fcis-3166	37	41	the	the	DET
fcis-3166	37	42	focus	focus	NOUN
fcis-3166	37	43	of	of	ADP
fcis-3166	37	44	the	the	DET
fcis-3166	37	45	research	research	NOUN
fcis-3166	37	46	.	.	PUNCT
fcis-3166	38	1	on	on	ADP
fcis-3166	38	2	the	the	DET
fcis-3166	38	3	one	one	NUM
fcis-3166	38	4	hand	hand	NOUN
fcis-3166	38	5	,	,	PUNCT
fcis-3166	38	6	the	the	DET
fcis-3166	38	7	application	application	NOUN
fcis-3166	38	8	of	of	ADP
fcis-3166	38	9	new	new	ADJ
fcis-3166	38	10	materials	material	NOUN
fcis-3166	38	11	provides	provide	VERB
fcis-3166	38	12	greater	great	ADJ
fcis-3166	38	13	freedom	freedom	NOUN
fcis-3166	38	14	for	for	ADP
fcis-3166	38	15	design	design	NOUN
fcis-3166	38	16	.	.	PUNCT
fcis-3166	39	1	the	the	DET
fcis-3166	39	2	new	new	ADJ
fcis-3166	39	3	design	design	NOUN
fcis-3166	39	4	method	method	NOUN
fcis-3166	39	5	further	far	ADV
fcis-3166	39	6	optimizes	optimize	VERB
fcis-3166	39	7	the	the	DET
fcis-3166	39	8	efficiency	efficiency	NOUN
fcis-3166	39	9	of	of	ADP
fcis-3166	39	10	the	the	DET
fcis-3166	39	11	inner	inner	ADJ
fcis-3166	39	12	and	and	CCONJ
fcis-3166	39	13	outer	outer	ADJ
fcis-3166	39	14	structure	structure	NOUN
fcis-3166	39	15	of	of	ADP
fcis-3166	39	16	the	the	DET
fcis-3166	39	17	blade	blade	NOUN
fcis-3166	39	18	.	.	PUNCT
fcis-3166	40	1	on	on	ADP
fcis-3166	40	2	the	the	DET
fcis-3166	40	3	other	other	ADJ
fcis-3166	40	4	hand	hand	NOUN
fcis-3166	40	5	,	,	PUNCT
fcis-3166	40	6	effective	effective	ADJ
fcis-3166	40	7	and	and	CCONJ
fcis-3166	40	8	reliable	reliable	ADJ
fcis-3166	40	9	processing	processing	NOUN
fcis-3166	40	10	technology	technology	NOUN
fcis-3166	40	11	can	can	AUX
fcis-3166	40	12	implement	implement	VERB
fcis-3166	40	13	the	the	DET
fcis-3166	40	14	advanced	advanced	ADJ
fcis-3166	40	15	performance	performance	NOUN
fcis-3166	40	16	expected	expect	VERB
fcis-3166	40	17	by	by	ADP
fcis-3166	40	18	the	the	DET
fcis-3166	40	19	design	design	NOUN
fcis-3166	40	20	.	.	PUNCT
fcis-3166	41	1	fig.2	fig.2	NOUN
fcis-3166	41	2	appearance	appearance	NOUN
fcis-3166	41	3	and	and	CCONJ
fcis-3166	41	4	internal	internal	ADJ
fcis-3166	41	5	structure	structure	NOUN
fcis-3166	41	6	of	of	ADP
fcis-3166	41	7	turbojet	turbojet	NOUN
fcis-3166	41	8	engine	engine	NOUN
fcis-3166	41	9	3	3	NUM
fcis-3166	41	10	.	.	PUNCT
fcis-3166	41	11	characteristics	characteristic	NOUN
fcis-3166	41	12	and	and	CCONJ
fcis-3166	41	13	difficulties	difficulty	NOUN
fcis-3166	41	14	of	of	ADP
fcis-3166	41	15	gas	gas	NOUN
fcis-3166	41	16	die	die	VERB
fcis-3166	41	17	hole	hole	NOUN
fcis-3166	41	18	processing	process	VERB
fcis-3166	41	19	aero	aero	PROPN
fcis-3166	41	20	engine	engine	NOUN
fcis-3166	41	21	air	air	NOUN
fcis-3166	41	22	die	die	VERB
fcis-3166	41	23	hole	hole	NOUN
fcis-3166	41	24	belongs	belong	VERB
fcis-3166	41	25	to	to	ADP
fcis-3166	41	26	microhole	microhole	NOUN
fcis-3166	41	27	structure	structure	NOUN
fcis-3166	41	28	,	,	PUNCT
fcis-3166	41	29	the	the	DET
fcis-3166	41	30	machining	machining	NOUN
fcis-3166	41	31	requirements	requirement	NOUN
fcis-3166	41	32	are	be	AUX
fcis-3166	41	33	developing	develop	VERB
fcis-3166	41	34	towards	towards	ADP
fcis-3166	41	35	the	the	DET
fcis-3166	41	36	direction	direction	NOUN
fcis-3166	41	37	of	of	ADP
fcis-3166	41	38	small	small	ADJ
fcis-3166	41	39	size	size	NOUN
fcis-3166	41	40	,	,	PUNCT
fcis-3166	41	41	large	large	ADJ
fcis-3166	41	42	depth	depth	NOUN
fcis-3166	41	43	to	to	ADP
fcis-3166	41	44	diameter	diameter	NOUN
fcis-3166	41	45	ratio	ratio	NOUN
fcis-3166	41	46	,	,	PUNCT
fcis-3166	41	47	high	high	ADJ
fcis-3166	41	48	surface	surface	NOUN
fcis-3166	41	49	quality	quality	NOUN
fcis-3166	41	50	and	and	CCONJ
fcis-3166	41	51	dimensional	dimensional	ADJ
fcis-3166	41	52	accuracy	accuracy	NOUN
fcis-3166	41	53	,	,	PUNCT
fcis-3166	41	54	so	so	CCONJ
fcis-3166	41	55	its	its	PRON
fcis-3166	41	56	processing	processing	NOUN
fcis-3166	41	57	technology	technology	NOUN
fcis-3166	41	58	has	have	AUX
fcis-3166	41	59	become	become	VERB
fcis-3166	41	60	a	a	DET
fcis-3166	41	61	technical	technical	ADJ
fcis-3166	41	62	problem	problem	NOUN
fcis-3166	41	63	.	.	PUNCT
fcis-3166	42	1	traditional	traditional	ADJ
fcis-3166	42	2	machining	machining	NOUN
fcis-3166	42	3	is	be	AUX
fcis-3166	42	4	easy	easy	ADJ
fcis-3166	42	5	to	to	PART
fcis-3166	42	6	lead	lead	VERB
fcis-3166	42	7	to	to	ADP
fcis-3166	42	8	mechanical	mechanical	ADJ
fcis-3166	42	9	drill	drill	NOUN
fcis-3166	42	10	bit	bit	NOUN
fcis-3166	42	11	fracture	fracture	NOUN
fcis-3166	42	12	,	,	PUNCT
fcis-3166	42	13	hole	hole	NOUN
fcis-3166	42	14	center	center	NOUN
fcis-3166	42	15	line	line	NOUN
fcis-3166	42	16	deflection	deflection	NOUN
fcis-3166	42	17	,	,	PUNCT
fcis-3166	42	18	hole	hole	NOUN
fcis-3166	42	19	wall	wall	PROPN
fcis-3166	42	20	surface	surface	PROPN
fcis-3166	42	21	quality	quality	PROPN
fcis-3166	42	22	low	low	ADJ
fcis-3166	42	23	,	,	PUNCT
fcis-3166	42	24	and	and	CCONJ
fcis-3166	42	25	special	special	ADJ
fcis-3166	42	26	machining	machining	NOUN
fcis-3166	42	27	methods	method	NOUN
fcis-3166	42	28	also	also	ADV
fcis-3166	42	29	have	have	VERB
fcis-3166	42	30	great	great	ADJ
fcis-3166	42	31	limitations	limitation	NOUN
fcis-3166	42	32	,	,	PUNCT
fcis-3166	42	33	such	such	ADJ
fcis-3166	42	34	as	as	ADP
fcis-3166	42	35	:	:	PUNCT
fcis-3166	42	36	ultrasonic	ultrasonic	ADJ
fcis-3166	42	37	machining	machining	NOUN
fcis-3166	42	38	speed	speed	NOUN
fcis-3166	42	39	is	be	AUX
fcis-3166	42	40	low	low	ADJ
fcis-3166	42	41	and	and	CCONJ
fcis-3166	42	42	microhole	microhole	NOUN
fcis-3166	42	43	accuracy	accuracy	NOUN
fcis-3166	42	44	is	be	AUX
fcis-3166	42	45	poor	poor	ADJ
fcis-3166	42	46	.	.	PUNCT
fcis-3166	43	1	high	high	ADJ
fcis-3166	43	2	pressure	pressure	NOUN
fcis-3166	43	3	water	water	NOUN
fcis-3166	43	4	jet	jet	NOUN
fcis-3166	43	5	method	method	NOUN
fcis-3166	43	6	equipment	equipment	NOUN
fcis-3166	43	7	investment	investment	NOUN
fcis-3166	43	8	is	be	AUX
fcis-3166	43	9	large	large	ADJ
fcis-3166	43	10	,	,	PUNCT
fcis-3166	43	11	machining	machine	VERB
fcis-3166	43	12	surface	surface	NOUN
fcis-3166	43	13	quality	quality	NOUN
fcis-3166	43	14	is	be	AUX
fcis-3166	43	15	not	not	PART
fcis-3166	43	16	good	good	ADJ
fcis-3166	43	17	and	and	CCONJ
fcis-3166	43	18	noise	noise	NOUN
fcis-3166	43	19	is	be	AUX
fcis-3166	43	20	large	large	ADJ
fcis-3166	43	21	;	;	PUNCT
fcis-3166	43	22	edm	edm	PROPN
fcis-3166	43	23	can	can	AUX
fcis-3166	43	24	only	only	ADV
fcis-3166	43	25	process	process	VERB
fcis-3166	43	26	conductive	conductive	ADJ
fcis-3166	43	27	materials	material	NOUN
fcis-3166	43	28	,	,	PUNCT
fcis-3166	43	29	resulting	result	VERB
fcis-3166	43	30	in	in	ADP
fcis-3166	43	31	low	low	ADJ
fcis-3166	43	32	processing	processing	NOUN
fcis-3166	43	33	efficiency	efficiency	NOUN
fcis-3166	43	34	and	and	CCONJ
fcis-3166	43	35	high	high	ADJ
fcis-3166	43	36	cost	cost	NOUN
fcis-3166	43	37	.	.	PUNCT
fcis-3166	44	1	there	there	PRON
fcis-3166	44	2	are	be	VERB
fcis-3166	44	3	defects	defect	NOUN
fcis-3166	44	4	such	such	ADJ
fcis-3166	44	5	as	as	ADP
fcis-3166	44	6	heat	heat	NOUN
fcis-3166	44	7	affected	affect	VERB
fcis-3166	44	8	zone	zone	NOUN
fcis-3166	44	9	,	,	PUNCT
fcis-3166	44	10	recast	recast	ADJ
fcis-3166	44	11	layer	layer	NOUN
fcis-3166	44	12	and	and	CCONJ
fcis-3166	44	13	microcracks	microcrack	NOUN
fcis-3166	44	14	in	in	ADP
fcis-3166	44	15	pore	pore	ADJ
fcis-3166	44	16	walls	wall	NOUN
fcis-3166	44	17	.	.	PUNCT
fcis-3166	45	1	electrochemical	electrochemical	ADJ
fcis-3166	45	2	machining	machining	NOUN
fcis-3166	45	3	is	be	AUX
fcis-3166	45	4	limited	limit	VERB
fcis-3166	45	5	to	to	ADP
fcis-3166	45	6	metal	metal	NOUN
fcis-3166	45	7	materials	material	NOUN
fcis-3166	45	8	.	.	PUNCT
fcis-3166	46	1	electron	electron	NOUN
fcis-3166	46	2	beam	beam	NOUN
fcis-3166	46	3	machining	machining	NOUN
fcis-3166	46	4	needs	need	NOUN
fcis-3166	46	5	to	to	PART
fcis-3166	46	6	be	be	AUX
fcis-3166	46	7	processed	process	VERB
fcis-3166	46	8	in	in	ADP
fcis-3166	46	9	vacuum	vacuum	PROPN
fcis-3166	46	10	environment	environment	NOUN
fcis-3166	46	11	,	,	PUNCT
fcis-3166	46	12	the	the	DET
fcis-3166	46	13	operating	operating	NOUN
fcis-3166	46	14	conditions	condition	NOUN
fcis-3166	46	15	are	be	AUX
fcis-3166	46	16	harsh	harsh	ADJ
fcis-3166	46	17	,	,	PUNCT
fcis-3166	46	18	the	the	DET
fcis-3166	46	19	equipment	equipment	NOUN
fcis-3166	46	20	is	be	AUX
fcis-3166	46	21	expensive	expensive	ADJ
fcis-3166	46	22	and	and	CCONJ
fcis-3166	46	23	so	so	ADV
fcis-3166	46	24	on	on	ADV
fcis-3166	46	25	.	.	PUNCT
fcis-3166	47	1	in	in	ADP
fcis-3166	47	2	recent	recent	ADJ
fcis-3166	47	3	years	year	NOUN
fcis-3166	47	4	,	,	PUNCT
fcis-3166	47	5	the	the	DET
fcis-3166	47	6	field	field	NOUN
fcis-3166	47	7	of	of	ADP
fcis-3166	47	8	laser	laser	NOUN
fcis-3166	47	9	processing	processing	NOUN
fcis-3166	47	10	and	and	CCONJ
fcis-3166	47	11	manufacturing	manufacturing	NOUN
fcis-3166	47	12	has	have	AUX
fcis-3166	47	13	attracted	attract	VERB
fcis-3166	47	14	much	much	ADJ
fcis-3166	47	15	attention	attention	NOUN
fcis-3166	47	16	.	.	PUNCT
fcis-3166	48	1	with	with	ADP
fcis-3166	48	2	the	the	DET
fcis-3166	48	3	development	development	NOUN
fcis-3166	48	4	of	of	ADP
fcis-3166	48	5	laser	laser	NOUN
fcis-3166	48	6	technology	technology	NOUN
fcis-3166	48	7	,	,	PUNCT
fcis-3166	48	8	a	a	DET
fcis-3166	48	9	variety	variety	NOUN
fcis-3166	48	10	of	of	ADP
fcis-3166	48	11	laser	laser	NOUN
fcis-3166	48	12	processing	processing	NOUN
fcis-3166	48	13	technologies	technology	NOUN
fcis-3166	48	14	have	have	AUX
fcis-3166	48	15	emerged	emerge	VERB
fcis-3166	48	16	,	,	PUNCT
fcis-3166	48	17	such	such	ADJ
fcis-3166	48	18	as	as	ADP
fcis-3166	48	19	laser	laser	NOUN
fcis-3166	48	20	cutting	cutting	NOUN
fcis-3166	48	21	,	,	PUNCT
fcis-3166	48	22	laser	laser	NOUN
fcis-3166	48	23	connection	connection	NOUN
fcis-3166	48	24	,	,	PUNCT
fcis-3166	48	25	laser	laser	NOUN
fcis-3166	48	26	microhole	microhole	NOUN
fcis-3166	48	27	processing	processing	NOUN
fcis-3166	48	28	,	,	PUNCT
fcis-3166	48	29	laser	laser	NOUN
fcis-3166	48	30	cladding	cladding	NOUN
fcis-3166	48	31	,	,	PUNCT
fcis-3166	48	32	etc	etc	X
fcis-3166	48	33	.	.	X
fcis-3166	48	34	among	among	ADP
fcis-3166	48	35	them	they	PRON
fcis-3166	48	36	,	,	PUNCT
fcis-3166	48	37	laser	laser	NOUN
fcis-3166	48	38	microhole	microhole	NOUN
fcis-3166	48	39	machining	machining	NOUN
fcis-3166	48	40	is	be	AUX
fcis-3166	48	41	one	one	NUM
fcis-3166	48	42	of	of	ADP
fcis-3166	48	43	the	the	DET
fcis-3166	48	44	earliest	early	ADJ
fcis-3166	48	45	and	and	CCONJ
fcis-3166	48	46	most	most	ADV
fcis-3166	48	47	widely	widely	ADV
fcis-3166	48	48	used	use	VERB
fcis-3166	48	49	technologies	technology	NOUN
fcis-3166	48	50	in	in	ADP
fcis-3166	48	51	laser	laser	NOUN
fcis-3166	48	52	technology	technology	NOUN
fcis-3166	48	53	.	.	PUNCT
fcis-3166	49	1	it	it	PRON
fcis-3166	49	2	has	have	VERB
fcis-3166	49	3	a	a	DET
fcis-3166	49	4	series	series	NOUN
fcis-3166	49	5	of	of	ADP
fcis-3166	49	6	advantages	advantage	NOUN
fcis-3166	49	7	,	,	PUNCT
fcis-3166	49	8	such	such	ADJ
fcis-3166	49	9	as	as	ADP
fcis-3166	49	10	high	high	ADJ
fcis-3166	49	11	precision	precision	NOUN
fcis-3166	49	12	,	,	PUNCT
fcis-3166	49	13	high	high	ADJ
fcis-3166	49	14	efficiency	efficiency	NOUN
fcis-3166	49	15	,	,	PUNCT
fcis-3166	49	16	no	no	DET
fcis-3166	49	17	cutting	cut	VERB
fcis-3166	49	18	force	force	NOUN
fcis-3166	49	19	,	,	PUNCT
fcis-3166	49	20	no	no	DET
fcis-3166	49	21	pollution	pollution	NOUN
fcis-3166	49	22	,	,	PUNCT
fcis-3166	49	23	and	and	CCONJ
fcis-3166	49	24	can	can	AUX
fcis-3166	49	25	process	process	VERB
fcis-3166	49	26	difficult	difficult	ADJ
fcis-3166	49	27	-	-	PUNCT
fcis-3166	49	28	to	to	ADP
fcis-3166	49	29	-	-	PUNCT
fcis-3166	49	30	process	process	NOUN
fcis-3166	49	31	materials	material	NOUN
fcis-3166	49	32	such	such	ADJ
fcis-3166	49	33	as	as	ADP
fcis-3166	49	34	high	high	ADJ
fcis-3166	49	35	hardness	hardness	NOUN
fcis-3166	49	36	and	and	CCONJ
fcis-3166	49	37	high	high	ADJ
fcis-3166	49	38	brittleness	brittleness	NOUN
fcis-3166	49	39	,	,	PUNCT
fcis-3166	49	40	which	which	PRON
fcis-3166	49	41	is	be	AUX
fcis-3166	49	42	favored	favor	VERB
fcis-3166	49	43	by	by	ADP
fcis-3166	49	44	researchers	researcher	NOUN
fcis-3166	49	45	,	,	PUNCT
fcis-3166	49	46	especially	especially	ADV
fcis-3166	49	47	for	for	ADP
fcis-3166	49	48	high	high	ADJ
fcis-3166	49	49	-	-	PUNCT
fcis-3166	49	50	quality	quality	NOUN
fcis-3166	49	51	microholes	microhole	NOUN
fcis-3166	49	52	.	.	PUNCT
fcis-3166	50	1	compared	compare	VERB
fcis-3166	50	2	with	with	ADP
fcis-3166	50	3	traditional	traditional	ADJ
fcis-3166	50	4	machining	machining	NOUN
fcis-3166	50	5	methods	method	NOUN
fcis-3166	50	6	,	,	PUNCT
fcis-3166	50	7	laser	laser	NOUN
fcis-3166	50	8	microhole	microhole	NOUN
fcis-3166	50	9	machining	machining	NOUN
fcis-3166	50	10	is	be	AUX
fcis-3166	50	11	a	a	DET
fcis-3166	50	12	more	more	ADV
fcis-3166	50	13	effective	effective	ADJ
fcis-3166	50	14	machining	machining	NOUN
fcis-3166	50	15	method	method	NOUN
fcis-3166	50	16	.	.	PUNCT
fcis-3166	51	1	ordinary	ordinary	ADJ
fcis-3166	51	2	laser	laser	NOUN
fcis-3166	51	3	may	may	AUX
fcis-3166	51	4	cause	cause	VERB
fcis-3166	51	5	recast	recast	ADJ
fcis-3166	51	6	layer	layer	NOUN
fcis-3166	51	7	,	,	PUNCT
fcis-3166	51	8	in	in	ADP
fcis-3166	51	9	the	the	DET
fcis-3166	51	10	process	process	NOUN
fcis-3166	51	11	of	of	ADP
fcis-3166	51	12	processing	processing	NOUN
fcis-3166	51	13	microholes	microhole	NOUN
fcis-3166	51	14	,	,	PUNCT
fcis-3166	51	15	laser	laser	NOUN
fcis-3166	51	16	beam	beam	NOUN
fcis-3166	51	17	focus	focus	NOUN
fcis-3166	51	18	to	to	ADP
fcis-3166	51	19	the	the	DET
fcis-3166	51	20	surface	surface	NOUN
fcis-3166	51	21	of	of	ADP
fcis-3166	51	22	the	the	DET
fcis-3166	51	23	workpiece	workpiece	NOUN
fcis-3166	51	24	,	,	PUNCT
fcis-3166	51	25	so	so	SCONJ
fcis-3166	51	26	that	that	SCONJ
fcis-3166	51	27	the	the	DET
fcis-3166	51	28	material	material	NOUN
fcis-3166	51	29	melting	melting	NOUN
fcis-3166	51	30	,	,	PUNCT
fcis-3166	51	31	vaporization	vaporization	NOUN
fcis-3166	51	32	and	and	CCONJ
fcis-3166	51	33	condensation	condensation	NOUN
fcis-3166	51	34	,	,	PUNCT
fcis-3166	51	35	the	the	DET
fcis-3166	51	36	increase	increase	NOUN
fcis-3166	51	37	of	of	ADP
fcis-3166	51	38	heat	heat	NOUN
fcis-3166	51	39	makes	make	VERB
fcis-3166	51	40	the	the	DET
fcis-3166	51	41	material	material	ADJ
fcis-3166	51	42	steam	steam	NOUN
fcis-3166	51	43	with	with	ADP
fcis-3166	51	44	great	great	ADJ
fcis-3166	51	45	pressure	pressure	NOUN
fcis-3166	51	46	from	from	ADP
fcis-3166	51	47	the	the	DET
fcis-3166	51	48	bottom	bottom	NOUN
fcis-3166	51	49	of	of	ADP
fcis-3166	51	50	the	the	DET
fcis-3166	51	51	spray	spray	NOUN
fcis-3166	51	52	,	,	PUNCT
fcis-3166	51	53	in	in	ADP
fcis-3166	51	54	the	the	DET
fcis-3166	51	55	rapid	rapid	ADJ
fcis-3166	51	56	cooling	cooling	NOUN
fcis-3166	51	57	and	and	CCONJ
fcis-3166	51	58	heating	heating	NOUN
fcis-3166	51	59	process	process	NOUN
fcis-3166	51	60	,	,	PUNCT
fcis-3166	51	61	there	there	PRON
fcis-3166	51	62	are	be	VERB
fcis-3166	51	63	some	some	PRON
fcis-3166	51	64	unable	unable	ADJ
fcis-3166	51	65	to	to	PART
fcis-3166	51	66	spray	spray	VERB
fcis-3166	51	67	the	the	DET
fcis-3166	51	68	molten	molten	ADJ
fcis-3166	51	69	material	material	NOUN
fcis-3166	51	70	recoagulated	recoagulate	VERB
fcis-3166	51	71	on	on	ADP
fcis-3166	51	72	the	the	DET
fcis-3166	51	73	surface	surface	NOUN
fcis-3166	51	74	of	of	ADP
fcis-3166	51	75	the	the	DET
fcis-3166	51	76	hole	hole	NOUN
fcis-3166	51	77	wall	wall	NOUN
fcis-3166	51	78	,	,	PUNCT
fcis-3166	51	79	the	the	DET
fcis-3166	51	80	formation	formation	NOUN
fcis-3166	51	81	of	of	ADP
fcis-3166	51	82	recast	recast	ADJ
fcis-3166	51	83	layer	layer	NOUN
fcis-3166	51	84	.	.	PUNCT
fcis-3166	52	1	as	as	SCONJ
fcis-3166	52	2	shown	show	VERB
fcis-3166	52	3	in	in	ADP
fcis-3166	52	4	figure	figure	NOUN
fcis-3166	52	5	1	1	NUM
fcis-3166	52	6	-	-	SYM
fcis-3166	52	7	3	3	NUM
fcis-3166	52	8	,	,	PUNCT
fcis-3166	52	9	serious	serious	ADJ
fcis-3166	52	10	recasting	recast	VERB
fcis-3166	52	11	layers	layer	NOUN
fcis-3166	52	12	exist	exist	VERB
fcis-3166	52	13	in	in	ADP
fcis-3166	52	14	the	the	DET
fcis-3166	52	15	nanosecond	nanosecond	NOUN
fcis-3166	52	16	laser	laser	NOUN
fcis-3166	52	17	machining	machining	NOUN
fcis-3166	52	18	of	of	ADP
fcis-3166	52	19	microholes	microhole	NOUN
fcis-3166	52	20	on	on	ADP
fcis-3166	52	21	nickel	nickel	NOUN
fcis-3166	52	22	-	-	PUNCT
fcis-3166	52	23	based	base	VERB
fcis-3166	52	24	alloys	alloy	NOUN
fcis-3166	52	25	.	.	PUNCT
fcis-3166	53	1	the	the	DET
fcis-3166	53	2	metallurgical	metallurgical	ADJ
fcis-3166	53	3	state	state	NOUN
fcis-3166	53	4	,	,	PUNCT
fcis-3166	53	5	mechanical	mechanical	ADJ
fcis-3166	53	6	properties	property	NOUN
fcis-3166	53	7	and	and	CCONJ
fcis-3166	53	8	base	base	NOUN
fcis-3166	53	9	material	material	NOUN
fcis-3166	53	10	of	of	ADP
fcis-3166	53	11	recast	recast	ADJ
fcis-3166	53	12	layer	layer	NOUN
fcis-3166	53	13	are	be	AUX
fcis-3166	53	14	very	very	ADV
fcis-3166	53	15	different	different	ADJ
fcis-3166	53	16	,	,	PUNCT
fcis-3166	53	17	which	which	PRON
fcis-3166	53	18	is	be	AUX
fcis-3166	53	19	easy	easy	ADJ
fcis-3166	53	20	to	to	PART
fcis-3166	53	21	cause	cause	VERB
fcis-3166	53	22	microcracks	microcrack	NOUN
fcis-3166	53	23	.	.	PUNCT
fcis-3166	54	1	therefore	therefore	ADV
fcis-3166	54	2	,	,	PUNCT
fcis-3166	54	3	the	the	DET
fcis-3166	54	4	recasting	recast	VERB
fcis-3166	54	5	layer	layer	NOUN
fcis-3166	54	6	must	must	AUX
fcis-3166	54	7	be	be	AUX
fcis-3166	54	8	strictly	strictly	ADV
fcis-3166	54	9	controlled	control	VERB
fcis-3166	54	10	in	in	ADP
fcis-3166	54	11	the	the	DET
fcis-3166	54	12	process	process	NOUN
fcis-3166	54	13	of	of	ADP
fcis-3166	54	14	laser	laser	NOUN
fcis-3166	54	15	machining	machining	NOUN
fcis-3166	54	16	microholes	microhole	NOUN
fcis-3166	54	17	,	,	PUNCT
fcis-3166	54	18	and	and	CCONJ
fcis-3166	54	19	the	the	DET
fcis-3166	54	20	thickness	thickness	NOUN
fcis-3166	54	21	of	of	ADP
fcis-3166	54	22	the	the	DET
fcis-3166	54	23	recasting	recast	VERB
fcis-3166	54	24	layer	layer	NOUN
fcis-3166	54	25	can	can	AUX
fcis-3166	54	26	be	be	AUX
fcis-3166	54	27	reduced	reduce	VERB
fcis-3166	54	28	or	or	CCONJ
fcis-3166	54	29	even	even	ADV
fcis-3166	54	30	disappeared	disappear	VERB
fcis-3166	54	31	,	,	PUNCT
fcis-3166	54	32	which	which	PRON
fcis-3166	54	33	gives	give	VERB
fcis-3166	54	34	rise	rise	NOUN
fcis-3166	54	35	to	to	PART
fcis-3166	54	36	femtosecond	femtosecond	VERB
fcis-3166	54	37	laser	laser	NOUN
fcis-3166	54	38	technology	technology	NOUN
fcis-3166	54	39	.	.	PUNCT
fcis-3166	55	1	4	4	X
fcis-3166	55	2	.	.	X
fcis-3166	55	3	conclusion	conclusion	NOUN
fcis-3166	55	4	femtosecond	femtosecond	NOUN
fcis-3166	55	5	laser	laser	NOUN
fcis-3166	55	6	micromachining	micromachining	NOUN
fcis-3166	55	7	can	can	AUX
fcis-3166	55	8	process	process	VERB
fcis-3166	55	9	any	any	DET
fcis-3166	55	10	material	material	NOUN
fcis-3166	55	11	with	with	ADP
fcis-3166	55	12	extremely	extremely	ADV
fcis-3166	55	13	high	high	ADJ
fcis-3166	55	14	machining	machining	NOUN
fcis-3166	55	15	accuracy	accuracy	NOUN
fcis-3166	55	16	and	and	CCONJ
fcis-3166	55	17	minimal	minimal	ADJ
fcis-3166	55	18	peripheral	peripheral	ADJ
fcis-3166	55	19	damage	damage	NOUN
fcis-3166	55	20	.	.	PUNCT
fcis-3166	56	1	is	be	AUX
fcis-3166	56	2	the	the	DET
fcis-3166	56	3	aero	aero	PROPN
fcis-3166	56	4	engine	engine	NOUN
fcis-3166	56	5	blade	blade	NOUN
fcis-3166	56	6	air	air	NOUN
fcis-3166	56	7	film	film	NOUN
fcis-3166	56	8	hole	hole	NOUN
fcis-3166	56	9	plus	plus	CCONJ
fcis-3166	56	10	?	?	PUNCT
fcis-3166	57	1	an	an	DET
fcis-3166	57	2	important	important	ADJ
fcis-3166	57	3	development	development	NOUN
fcis-3166	57	4	trend	trend	NOUN
fcis-3166	57	5	in	in	ADP
fcis-3166	57	6	industry	industry	NOUN
fcis-3166	57	7	.	.	PUNCT
fcis-3166	58	1	therefore	therefore	ADV
fcis-3166	58	2	,	,	PUNCT
fcis-3166	58	3	in	in	ADP
fcis-3166	58	4	order	order	NOUN
fcis-3166	58	5	to	to	PART
fcis-3166	58	6	realize	realize	VERB
fcis-3166	58	7	the	the	DET
fcis-3166	58	8	reliable	reliable	ADJ
fcis-3166	58	9	application	application	NOUN
fcis-3166	58	10	of	of	ADP
fcis-3166	58	11	femtosecond	femtosecond	NOUN
fcis-3166	58	12	laser	laser	NOUN
fcis-3166	58	13	micromachining	micromachine	VERB
fcis-3166	58	14	in	in	ADP
fcis-3166	58	15	single	single	ADJ
fcis-3166	58	16	crystal	crystal	NOUN
fcis-3166	58	17	superalloy	superalloy	NOUN
fcis-3166	58	18	.	.	PUNCT
fcis-3166	59	1	the	the	DET
fcis-3166	59	2	formation	formation	NOUN
fcis-3166	59	3	of	of	ADP
fcis-3166	59	4	efficient	efficient	ADJ
fcis-3166	59	5	,	,	PUNCT
fcis-3166	59	6	high	high	ADJ
fcis-3166	59	7	quality	quality	NOUN
fcis-3166	59	8	gas	gas	NOUN
fcis-3166	59	9	film	film	NOUN
fcis-3166	59	10	hole	hole	NOUN
fcis-3166	59	11	processing	processing	NOUN
fcis-3166	59	12	technology	technology	NOUN
fcis-3166	59	13	.	.	PUNCT
fcis-3166	60	1	it	it	PRON
fcis-3166	60	2	is	be	AUX
fcis-3166	60	3	necessary	necessary	ADJ
fcis-3166	60	4	to	to	PART
fcis-3166	60	5	consider	consider	VERB
fcis-3166	60	6	the	the	DET
fcis-3166	60	7	directivity	directivity	NOUN
fcis-3166	60	8	of	of	ADP
fcis-3166	60	9	single	single	ADJ
fcis-3166	60	10	crystal	crystal	NOUN
fcis-3166	60	11	superalloy	superalloy	NOUN
fcis-3166	60	12	,	,	PUNCT
fcis-3166	60	13	study	study	VERB
fcis-3166	60	14	the	the	DET
fcis-3166	60	15	damage	damage	NOUN
fcis-3166	60	16	mechanism	mechanism	NOUN
fcis-3166	60	17	and	and	CCONJ
fcis-3166	60	18	influencing	influence	VERB
fcis-3166	60	19	factors	factor	NOUN
fcis-3166	60	20	of	of	ADP
fcis-3166	60	21	femtosecond	femtosecond	NOUN
fcis-3166	60	22	laser	laser	NOUN
fcis-3166	60	23	processing	processing	NOUN
fcis-3166	60	24	on	on	ADP
fcis-3166	60	25	single	single	ADJ
fcis-3166	60	26	crystal	crystal	NOUN
fcis-3166	60	27	superalloy	superalloy	NOUN
fcis-3166	60	28	,	,	PUNCT
fcis-3166	60	29	and	and	CCONJ
fcis-3166	60	30	study	study	VERB
fcis-3166	60	31	the	the	DET
fcis-3166	60	32	mechanical	mechanical	ADJ
fcis-3166	60	33	effect	effect	NOUN
fcis-3166	60	34	of	of	ADP
fcis-3166	60	35	femtosecond	femtosecond	NOUN
fcis-3166	60	36	laser	laser	NOUN
fcis-3166	60	37	processing	processing	NOUN
fcis-3166	60	38	.	.	PUNCT
fcis-3166	61	1	it	it	PRON
fcis-3166	61	2	provides	provide	VERB
fcis-3166	61	3	the	the	DET
fcis-3166	61	4	theoretical	theoretical	ADJ
fcis-3166	61	5	basis	basis	NOUN
fcis-3166	61	6	and	and	CCONJ
fcis-3166	61	7	technical	technical	ADJ
fcis-3166	61	8	support	support	NOUN
fcis-3166	61	9	for	for	ADP
fcis-3166	61	10	determining	determine	VERB
fcis-3166	61	11	the	the	DET
fcis-3166	61	12	excellent	excellent	ADJ
fcis-3166	61	13	process	process	NOUN
fcis-3166	61	14	parameters	parameter	NOUN
fcis-3166	61	15	of	of	ADP
fcis-3166	61	16	the	the	DET
fcis-3166	61	17	gas	gas	NOUN
fcis-3166	61	18	film	film	NOUN
fcis-3166	61	19	hole	hole	NOUN
fcis-3166	61	20	of	of	ADP
fcis-3166	61	21	femtosecond	femtosecond	NOUN
fcis-3166	61	22	laser	laser	NOUN
fcis-3166	61	23	plus	plus	CCONJ
fcis-3166	61	24	t	t	PROPN
fcis-3166	61	25	single	single	ADJ
fcis-3166	61	26	product	product	NOUN
fcis-3166	61	27	hightemperature	hightemperature	NOUN
fcis-3166	61	28	alloy	alloy	NOUN
fcis-3166	61	29	,	,	PUNCT
fcis-3166	61	30	and	and	CCONJ
fcis-3166	61	31	provides	provide	VERB
fcis-3166	61	32	reference	reference	NOUN
fcis-3166	61	33	basis	basis	NOUN
fcis-3166	61	34	for	for	ADP
fcis-3166	61	35	blade	blade	NOUN
fcis-3166	61	36	application	application	NOUN
fcis-3166	61	37	and	and	CCONJ
fcis-3166	61	38	safety	safety	NOUN
fcis-3166	61	39	evaluation	evaluation	NOUN
fcis-3166	61	40	.	.	PUNCT
fcis-3166	62	1	references	reference	NOUN
fcis-3166	62	2	[	[	X
fcis-3166	62	3	1	1	NUM
fcis-3166	62	4	]	]	X
fcis-3166	62	5	zhang	zhang	PROPN
fcis-3166	62	6	yunlong	yunlong	PROPN
fcis-3166	62	7	,	,	PUNCT
fcis-3166	62	8	sun	sun	PROPN
fcis-3166	62	9	shufeng	shufeng	PROPN
fcis-3166	62	10	,	,	PUNCT
fcis-3166	62	11	wang	wang	PROPN
fcis-3166	62	12	qian	qian	PROPN
fcis-3166	62	13	,	,	PUNCT
fcis-3166	62	14	zhang	zhang	PROPN
fcis-3166	62	15	fengyun	fengyun	PROPN
fcis-3166	62	16	,	,	PUNCT
fcis-3166	62	17	liu	liu	PROPN
fcis-3166	62	18	li	li	PROPN
fcis-3166	62	19	,	,	PUNCT
fcis-3166	62	20	liu	liu	PROPN
fcis-3166	62	21	shiguang	shiguang	PROPN
fcis-3166	62	22	.	.	PUNCT
fcis-3166	63	1	study	study	NOUN
fcis-3166	63	2	on	on	ADP
fcis-3166	63	3	the	the	DET
fcis-3166	63	4	quality	quality	NOUN
fcis-3166	63	5	of	of	ADP
fcis-3166	63	6	microhole	microhole	NOUN
fcis-3166	63	7	in	in	ADP
fcis-3166	63	8	laser	laser	NOUN
fcis-3166	63	9	machining	machining	NOUN
fcis-3166	63	10	[	[	X
fcis-3166	63	11	j	j	X
fcis-3166	63	12	/	/	SYM
fcis-3166	63	13	ol	ol	PROPN
fcis-3166	63	14	]	]	PUNCT
fcis-3166	63	15	.	.	PUNCT
fcis-3166	64	1	advances	advance	NOUN
fcis-3166	64	2	in	in	ADP
fcis-3166	64	3	laser	laser	NOUN
fcis-3166	64	4	and	and	CCONJ
fcis-3166	64	5	optoelectronics	optoelectronic	NOUN
fcis-3166	64	6	:1	:1	PUNCT
fcis-3166	64	7	-	-	PUNCT
fcis-3166	64	8	31	31	NUM
fcis-3166	64	9	.	.	PUNCT
fcis-3166	64	10	88	88	NUM
fcis-3166	65	1	[	[	X
fcis-3166	65	2	2	2	NUM
fcis-3166	65	3	]	]	X
fcis-3166	65	4	egashira	egashira	PROPN
fcis-3166	65	5	k	k	PROPN
fcis-3166	65	6	,	,	PUNCT
fcis-3166	65	7	mizutani	mizutani	PROPN
fcis-3166	65	8	k.	k.	PROPN
fcis-3166	65	9	micro	micro	PROPN
fcis-3166	65	10	-	-	VERB
fcis-3166	65	11	drilling	drilling	NOUN
fcis-3166	65	12	of	of	ADP
fcis-3166	65	13	monocrystalline	monocrystalline	ADJ
fcis-3166	65	14	silicon	silicon	NOUN
fcis-3166	65	15	using	use	VERB
fcis-3166	65	16	a	a	DET
fcis-3166	65	17	cutting	cutting	NOUN
fcis-3166	65	18	tool[j	tool[j	NOUN
fcis-3166	65	19	]	]	PUNCT
fcis-3166	65	20	.	.	PUNCT
fcis-3166	66	1	precision	precision	NOUN
fcis-3166	66	2	engineering	engineering	NOUN
fcis-3166	66	3	,	,	PUNCT
fcis-3166	66	4	2002	2002	NUM
fcis-3166	66	5	,	,	PUNCT
fcis-3166	66	6	26(3	26(3	NUM
fcis-3166	66	7	):	):	PUNCT
fcis-3166	66	8	263	263	NUM
fcis-3166	66	9	-	-	SYM
fcis-3166	66	10	268	268	NUM
fcis-3166	66	11	.	.	PUNCT
fcis-3166	67	1	[	[	X
fcis-3166	67	2	3	3	X
fcis-3166	67	3	]	]	X
fcis-3166	67	4	lee	lee	PROPN
fcis-3166	67	5	t	t	PROPN
fcis-3166	67	6	c	c	PROPN
fcis-3166	67	7	,	,	PUNCT
fcis-3166	67	8	chan	chan	PROPN
fcis-3166	67	9	c	c	PROPN
fcis-3166	67	10	w.	w.	NOUN
fcis-3166	67	11	mechanism	mechanism	NOUN
fcis-3166	67	12	of	of	ADP
fcis-3166	67	13	the	the	DET
fcis-3166	67	14	ultrasonic	ultrasonic	ADJ
fcis-3166	67	15	machining	machining	NOUN
fcis-3166	67	16	of	of	ADP
fcis-3166	67	17	ceramic	ceramic	ADJ
fcis-3166	67	18	composites[j	composites[j	NOUN
fcis-3166	67	19	]	]	PUNCT
fcis-3166	67	20	.	.	PUNCT
fcis-3166	68	1	journal	journal	PROPN
fcis-3166	68	2	of	of	ADP
fcis-3166	68	3	materials	material	NOUN
fcis-3166	68	4	processing	processing	NOUN
fcis-3166	68	5	technology	technology	NOUN
fcis-3166	68	6	,	,	PUNCT
fcis-3166	68	7	1997	1997	NUM
fcis-3166	68	8	,	,	PUNCT
fcis-3166	68	9	71(2	71(2	NUM
fcis-3166	68	10	):	):	PUNCT
fcis-3166	68	11	195	195	NUM
fcis-3166	68	12	-	-	PUNCT
fcis-3166	68	13	201	201	NUM
fcis-3166	68	14	.	.	PUNCT
fcis-3166	69	1	[	[	X
fcis-3166	69	2	4	4	X
fcis-3166	69	3	]	]	X
fcis-3166	69	4	wang	wang	PROPN
fcis-3166	69	5	j	j	PROPN
fcis-3166	69	6	,	,	PUNCT
fcis-3166	69	7	zhang	zhang	PROPN
fcis-3166	69	8	j	j	PROPN
fcis-3166	69	9	,	,	PUNCT
fcis-3166	69	10	feng	feng	PROPN
fcis-3166	69	11	p	p	PROPN
fcis-3166	69	12	.	.	PUNCT
fcis-3166	70	1	effects	effect	NOUN
fcis-3166	70	2	of	of	ADP
fcis-3166	70	3	tool	tool	NOUN
fcis-3166	70	4	vibration	vibration	NOUN
fcis-3166	70	5	on	on	ADP
fcis-3166	70	6	fiber	fiber	NOUN
fcis-3166	70	7	fracture	fracture	NOUN
fcis-3166	70	8	in	in	ADP
fcis-3166	70	9	rotary	rotary	ADJ
fcis-3166	70	10	ultrasonic	ultrasonic	ADJ
fcis-3166	70	11	machining	machining	NOUN
fcis-3166	70	12	of	of	ADP
fcis-3166	70	13	c	c	NOUN
fcis-3166	70	14	/	/	SYM
fcis-3166	70	15	sic	sic	ADJ
fcis-3166	70	16	ceramic	ceramic	ADJ
fcis-3166	70	17	matrix	matrix	NOUN
fcis-3166	70	18	composites	composite	NOUN
fcis-3166	71	1	[	[	X
fcis-3166	71	2	j	j	X
fcis-3166	71	3	]	]	X
fcis-3166	71	4	.	.	PUNCT
fcis-3166	72	1	composites	composite	VERB
fcis-3166	72	2	part	part	NOUN
fcis-3166	72	3	b	b	NOUN
fcis-3166	72	4	:	:	PUNCT
fcis-3166	72	5	engineering	engineering	NOUN
fcis-3166	72	6	,	,	PUNCT
fcis-3166	72	7	2017	2017	NUM
fcis-3166	72	8	,	,	PUNCT
fcis-3166	72	9	129	129	NUM
fcis-3166	72	10	:	:	SYM
fcis-3166	72	11	233	233	NUM
fcis-3166	72	12	-	-	SYM
fcis-3166	72	13	242	242	NUM
fcis-3166	72	14	.	.	PUNCT
fcis-3166	73	1	[	[	X
fcis-3166	73	2	5	5	X
fcis-3166	73	3	]	]	PUNCT
fcis-3166	73	4	houxiao	houxiao	PROPN
fcis-3166	73	5	w	w	PROPN
fcis-3166	73	6	,	,	PUNCT
fcis-3166	73	7	sukai	sukai	PROPN
fcis-3166	73	8	z	z	PROPN
fcis-3166	73	9	,	,	PUNCT
fcis-3166	73	10	anand	anand	PROPN
fcis-3166	73	11	a	a	PROPN
fcis-3166	73	12	,	,	PUNCT
fcis-3166	73	13	et	et	PROPN
fcis-3166	73	14	al	al	PROPN
fcis-3166	73	15	.	.	PUNCT
fcis-3166	73	16	experimental	experimental	ADJ
fcis-3166	73	17	characterization	characterization	NOUN
fcis-3166	73	18	of	of	ADP
fcis-3166	73	19	laser	laser	NOUN
fcis-3166	73	20	trepanning	trepan	VERB
fcis-3166	73	21	performance	performance	NOUN
fcis-3166	73	22	enhanced	enhance	VERB
fcis-3166	73	23	by	by	ADP
fcis-3166	73	24	water	water	NOUN
fcis-3166	73	25	-	-	PUNCT
fcis-3166	73	26	based	base	VERB
fcis-3166	73	27	ultrasonic	ultrasonic	ADJ
fcis-3166	73	28	assistance[j	assistance[j	NOUN
fcis-3166	73	29	]	]	PUNCT
fcis-3166	73	30	.	.	PUNCT
fcis-3166	74	1	optics	optics	PROPN
fcis-3166	74	2	&	&	CCONJ
fcis-3166	74	3	laser	laser	PROPN
fcis-3166	74	4	technology	technology	NOUN
fcis-3166	74	5	,	,	PUNCT
fcis-3166	74	6	2019	2019	NUM
fcis-3166	74	7	,	,	PUNCT
fcis-3166	74	8	109	109	NUM
fcis-3166	74	9	:	:	SYM
fcis-3166	74	10	547	547	NUM
fcis-3166	74	11	-	-	SYM
fcis-3166	74	12	560	560	NUM
fcis-3166	74	13	.	.	PUNCT
fcis-3166	75	1	[	[	X
fcis-3166	75	2	6	6	NUM
fcis-3166	75	3	]	]	X
fcis-3166	75	4	wei	wei	PROPN
fcis-3166	75	5	c	c	PROPN
fcis-3166	75	6	,	,	PUNCT
fcis-3166	75	7	zhao	zhao	PROPN
fcis-3166	75	8	l	l	PROPN
fcis-3166	75	9	,	,	PUNCT
fcis-3166	75	10	hu	hu	PROPN
fcis-3166	76	1	d	d	PROPN
fcis-3166	76	2	,	,	PUNCT
fcis-3166	76	3	et	et	PROPN
fcis-3166	76	4	al	al	PROPN
fcis-3166	76	5	.	.	PUNCT
fcis-3166	77	1	electrical	electrical	ADJ
fcis-3166	77	2	discharge	discharge	NOUN
fcis-3166	77	3	machining	machining	NOUN
fcis-3166	77	4	of	of	ADP
fcis-3166	77	5	ceramic	ceramic	ADJ
fcis-3166	77	6	matrix	matrix	NOUN
fcis-3166	77	7	composites	composite	NOUN
fcis-3166	77	8	with	with	ADP
fcis-3166	77	9	ceramic	ceramic	ADJ
fcis-3166	77	10	fiber	fiber	NOUN
fcis-3166	77	11	reinforcements	reinforcement	NOUN
fcis-3166	78	1	[	[	X
fcis-3166	78	2	j	j	X
fcis-3166	78	3	]	]	X
fcis-3166	78	4	.	.	PUNCT
fcis-3166	79	1	international	international	ADJ
fcis-3166	79	2	journal	journal	PROPN
fcis-3166	79	3	of	of	ADP
fcis-3166	79	4	advanced	advanced	ADJ
fcis-3166	79	5	manufacturing	manufacturing	NOUN
fcis-3166	79	6	technology	technology	NOUN
fcis-3166	79	7	,	,	PUNCT
fcis-3166	79	8	2013	2013	NUM
fcis-3166	79	9	,	,	PUNCT
fcis-3166	79	10	64	64	NUM
fcis-3166	79	11	(	(	PUNCT
fcis-3166	79	12	1	1	NUM
fcis-3166	79	13	-	-	SYM
fcis-3166	79	14	4	4	NUM
fcis-3166	79	15	):	):	PUNCT
fcis-3166	79	16	187	187	NUM
fcis-3166	79	17	-	-	SYM
fcis-3166	79	18	194	194	NUM
fcis-3166	79	19	.	.	PUNCT
fcis-3166	80	1	[	[	X
fcis-3166	80	2	7	7	X
fcis-3166	80	3	]	]	X
fcis-3166	80	4	muttamara	muttamara	NOUN
fcis-3166	80	5	a	a	NOUN
fcis-3166	80	6	,	,	PUNCT
fcis-3166	80	7	fukuzawa	fukuzawa	PROPN
fcis-3166	80	8	y	y	PROPN
fcis-3166	80	9	,	,	PUNCT
fcis-3166	80	10	mohri	mohri	NOUN
fcis-3166	80	11	n	n	CCONJ
fcis-3166	80	12	,	,	PUNCT
fcis-3166	80	13	et	et	PROPN
fcis-3166	80	14	al	al	PROPN
fcis-3166	80	15	.	.	PROPN
fcis-3166	80	16	probability	probability	NOUN
fcis-3166	80	17	of	of	ADP
fcis-3166	80	18	precision	precision	NOUN
fcis-3166	80	19	micro	micro	NOUN
fcis-3166	80	20	-	-	NOUN
fcis-3166	80	21	machining	machining	NOUN
fcis-3166	80	22	of	of	ADP
fcis-3166	80	23	insulating	insulate	VERB
fcis-3166	80	24	si3n4	si3n4	PROPN
fcis-3166	80	25	ceramics	ceramic	NOUN
fcis-3166	80	26	by	by	ADP
fcis-3166	80	27	edm[j	edm[j	PROPN
fcis-3166	80	28	]	]	PUNCT
fcis-3166	80	29	.	.	PUNCT
fcis-3166	81	1	journal	journal	PROPN
fcis-3166	81	2	of	of	ADP
fcis-3166	81	3	materials	material	NOUN
fcis-3166	81	4	processing	processing	NOUN
fcis-3166	81	5	technology	technology	NOUN
fcis-3166	81	6	,	,	PUNCT
fcis-3166	81	7	2003	2003	NUM
fcis-3166	81	8	,	,	PUNCT
fcis-3166	81	9	140	140	NUM
fcis-3166	81	10	(	(	PUNCT
fcis-3166	81	11	1	1	NUM
fcis-3166	81	12	-	-	SYM
fcis-3166	81	13	3	3	NUM
fcis-3166	81	14	)	)	PUNCT
fcis-3166	81	15	:	:	PUNCT
fcis-3166	81	16	243	243	NUM
fcis-3166	81	17	-	-	SYM
fcis-3166	81	18	247	247	NUM
fcis-3166	81	19	.	.	PUNCT
fcis-3166	82	1	[	[	X
fcis-3166	82	2	8	8	NUM
fcis-3166	82	3	]	]	X
fcis-3166	82	4	ahn	ahn	PROPN
fcis-3166	82	5	s	s	PROPN
fcis-3166	82	6	h	h	NOUN
fcis-3166	82	7	,	,	PUNCT
fcis-3166	82	8	ryu	ryu	PROPN
fcis-3166	82	9	s	s	PROPN
fcis-3166	82	10	h	h	NOUN
fcis-3166	82	11	,	,	PUNCT
fcis-3166	82	12	choi	choi	PROPN
fcis-3166	82	13	d	d	PROPN
fcis-3166	82	14	k	k	PROPN
fcis-3166	82	15	,	,	PUNCT
fcis-3166	82	16	et	et	PROPN
fcis-3166	82	17	al	al	PROPN
fcis-3166	82	18	.	.	PROPN
fcis-3166	82	19	electro	electro	PROPN
fcis-3166	82	20	-	-	PUNCT
fcis-3166	82	21	chemical	chemical	NOUN
fcis-3166	82	22	micro	micro	NOUN
fcis-3166	82	23	drilling	drilling	NOUN
fcis-3166	82	24	using	use	VERB
fcis-3166	82	25	ultra	ultra	ADJ
fcis-3166	82	26	short	short	ADJ
fcis-3166	82	27	pulses[j	pulses[j	NOUN
fcis-3166	82	28	]	]	PUNCT
fcis-3166	82	29	.	.	PUNCT
fcis-3166	83	1	precision	precision	NOUN
fcis-3166	83	2	engineering	engineering	NOUN
fcis-3166	83	3	,	,	PUNCT
fcis-3166	83	4	2004	2004	NUM
fcis-3166	83	5	,	,	PUNCT
fcis-3166	83	6	28(2	28(2	NUM
fcis-3166	83	7	):	):	PUNCT
fcis-3166	83	8	129	129	NUM
fcis-3166	83	9	-	-	SYM
fcis-3166	83	10	134	134	NUM
fcis-3166	83	11	.	.	PUNCT
fcis-3166	84	1	[	[	X
fcis-3166	84	2	9	9	NUM
fcis-3166	84	3	]	]	PUNCT
fcis-3166	84	4	dubey	dubey	VERB
fcis-3166	84	5	a	a	DET
fcis-3166	84	6	k	k	PROPN
fcis-3166	84	7	,	,	PUNCT
fcis-3166	84	8	yadava	yadava	PROPN
fcis-3166	84	9	v.	v.	ADP
fcis-3166	84	10	experimental	experimental	ADJ
fcis-3166	84	11	study	study	NOUN
fcis-3166	84	12	of	of	ADP
fcis-3166	84	13	nd	nd	ADP
fcis-3166	84	14	:	:	PUNCT
fcis-3166	84	15	yag	yag	NOUN
fcis-3166	84	16	laser	laser	NOUN
fcis-3166	84	17	beam	beam	NOUN
fcis-3166	84	18	machining	machining	NOUN
fcis-3166	84	19	–	–	PUNCT
fcis-3166	84	20	an	an	DET
fcis-3166	84	21	overview[j	overview[j	PROPN
fcis-3166	84	22	]	]	PUNCT
fcis-3166	84	23	.	.	PUNCT
fcis-3166	85	1	journal	journal	PROPN
fcis-3166	85	2	of	of	ADP
fcis-3166	85	3	materials	material	NOUN
fcis-3166	85	4	processing	processing	NOUN
fcis-3166	85	5	technology	technology	NOUN
fcis-3166	85	6	,	,	PUNCT
fcis-3166	85	7	2008	2008	NUM
fcis-3166	85	8	,	,	PUNCT
fcis-3166	85	9	195(1	195(1	NUM
fcis-3166	85	10	-	-	SYM
fcis-3166	85	11	3):15	3):15	NUM
fcis-3166	85	12	-	-	PUNCT
fcis-3166	85	13	26	26	NUM
fcis-3166	85	14	.	.	PUNCT
fcis-3166	86	1	[	[	X
fcis-3166	86	2	10	10	NUM
fcis-3166	86	3	]	]	PUNCT
fcis-3166	86	4	kononenko	kononenko	PROPN
fcis-3166	86	5	t	t	PROPN
fcis-3166	86	6	v	v	NOUN
fcis-3166	86	7	,	,	PUNCT
fcis-3166	86	8	ralchenko	ralchenko	NOUN
fcis-3166	86	9	v	v	ADP
fcis-3166	86	10	g	g	PROPN
fcis-3166	86	11	,	,	PUNCT
fcis-3166	86	12	vlasov	vlasov	NOUN
fcis-3166	87	1	i	i	PROPN
fcis-3166	87	2	i	i	PROPN
fcis-3166	87	3	,	,	PUNCT
fcis-3166	87	4	et	et	PROPN
fcis-3166	87	5	al	al	PROPN
fcis-3166	87	6	.	.	PUNCT
fcis-3166	87	7	ablation	ablation	NOUN
fcis-3166	87	8	of	of	ADP
fcis-3166	87	9	cvd	cvd	PROPN
fcis-3166	87	10	diamond	diamond	PROPN
fcis-3166	87	11	with	with	ADP
fcis-3166	87	12	nanosecond	nanosecond	NOUN
fcis-3166	87	13	laser	laser	NOUN
fcis-3166	87	14	pulses	pulse	NOUN
fcis-3166	87	15	of	of	ADP
fcis-3166	87	16	uv	uv	NOUN
fcis-3166	87	17	-ir	-ir	NOUN
fcis-3166	87	18	range	range	NOUN
fcis-3166	87	19	1[j	1[j	NUM
fcis-3166	87	20	]	]	PUNCT
fcis-3166	87	21	.	.	PUNCT
fcis-3166	88	1	diamond	diamond	PROPN
fcis-3166	88	2	&	&	CCONJ
fcis-3166	88	3	related	related	ADJ
fcis-3166	88	4	materials	material	NOUN
fcis-3166	88	5	,	,	PUNCT
fcis-3166	88	6	1998	1998	NUM
fcis-3166	88	7	,	,	PUNCT
fcis-3166	88	8	31	31	NUM
fcis-3166	88	9	(	(	PUNCT
fcis-3166	88	10	1	1	NUM
fcis-3166	88	11	)	)	PUNCT
fcis-3166	88	12	:	:	PUNCT
fcis-3166	88	13	1	1	NUM
fcis-3166	88	14	-	-	SYM
fcis-3166	88	15	8.7	8.7	NUM
fcis-3166	88	16	(	(	PUNCT
fcis-3166	88	17	1112	1112	NUM
fcis-3166	88	18	)	)	PUNCT
fcis-3166	88	19	:	:	PUNCT
fcis-3166	88	20	1623	1623	NUM
fcis-3166	88	21	-	-	SYM
fcis-3166	88	22	1627	1627	NUM
fcis-3166	88	23	.	.	PUNCT
fcis-3166	89	1	[	[	X
fcis-3166	89	2	11	11	NUM
fcis-3166	89	3	]	]	X
fcis-3166	89	4	mcelroy	mcelroy	PROPN
fcis-3166	89	5	s	s	PROPN
fcis-3166	89	6	,	,	PUNCT
fcis-3166	89	7	yang	yang	PROPN
fcis-3166	89	8	d	d	PROPN
fcis-3166	89	9	,	,	PUNCT
fcis-3166	89	10	reddy	reddy	PROPN
fcis-3166	89	11	r.	r.	PROPN
fcis-3166	89	12	laser	laser	PROPN
fcis-3166	89	13	processing	processing	NOUN
fcis-3166	89	14	of	of	ADP
fcis-3166	89	15	titanium	titanium	PROPN
fcis-3166	89	16	aluminides[j	aluminides[j	PROPN
fcis-3166	89	17	]	]	PUNCT
fcis-3166	89	18	.	.	PUNCT
fcis-3166	90	1	journal	journal	PROPN
fcis-3166	90	2	of	of	ADP
fcis-3166	90	3	materials	material	NOUN
fcis-3166	90	4	engineering	engineering	NOUN
fcis-3166	90	5	&	&	CCONJ
fcis-3166	90	6	performance	performance	NOUN
fcis-3166	90	7	,	,	PUNCT
fcis-3166	90	8	2000	2000	NUM
fcis-3166	90	9	,	,	PUNCT
fcis-3166	90	10	9(5	9(5	NUM
fcis-3166	90	11	):	):	PUNCT
fcis-3166	90	12	506	506	NUM
fcis-3166	90	13	-	-	SYM
fcis-3166	90	14	515	515	NUM
fcis-3166	90	15	.	.	PUNCT
fcis-3166	91	1	[	[	X
fcis-3166	91	2	12	12	NUM
fcis-3166	91	3	]	]	X
fcis-3166	91	4	she	she	PRON
fcis-3166	91	5	j	j	PROPN
fcis-3166	92	1	c	c	X
fcis-3166	92	2	,	,	PUNCT
fcis-3166	92	3	an	an	DET
fcis-3166	92	4	s	s	PROPN
fcis-3166	92	5	,	,	PUNCT
fcis-3166	92	6	deng	deng	PROPN
fcis-3166	92	7	s	s	PROPN
fcis-3166	92	8	z	z	PROPN
fcis-3166	92	9	,	,	PUNCT
fcis-3166	92	10	et	et	PROPN
fcis-3166	92	11	al	al	PROPN
fcis-3166	92	12	.	.	PROPN
fcis-3166	93	1	laser	laser	NOUN
fcis-3166	93	2	welding	welding	NOUN
fcis-3166	93	3	of	of	ADP
fcis-3166	93	4	a	a	DET
fcis-3166	93	5	single	single	ADJ
fcis-3166	93	6	tungsten	tungsten	NOUN
fcis-3166	93	7	oxide	oxide	NOUN
fcis-3166	93	8	nanotip	nanotip	NOUN
fcis-3166	93	9	on	on	ADP
fcis-3166	93	10	a	a	DET
fcis-3166	93	11	handleable	handleable	ADJ
fcis-3166	93	12	tungsten	tungsten	ADJ
fcis-3166	93	13	wire	wire	NOUN
fcis-3166	93	14	:	:	PUNCT
fcis-3166	93	15	a	a	DET
fcis-3166	93	16	demonstration	demonstration	NOUN
fcis-3166	93	17	of	of	ADP
fcis-3166	93	18	laser	laser	NOUN
fcis-3166	93	19	-	-	PUNCT
fcis-3166	93	20	weld	weld	NOUN
fcis-3166	93	21	nanoassembly[j	nanoassembly[j	NOUN
fcis-3166	93	22	]	]	PUNCT
fcis-3166	93	23	.	.	PUNCT
fcis-3166	94	1	applied	apply	VERB
fcis-3166	94	2	physics	physics	NOUN
fcis-3166	94	3	letters	letter	NOUN
fcis-3166	94	4	,	,	PUNCT
fcis-3166	94	5	2007	2007	NUM
fcis-3166	94	6	,	,	PUNCT
fcis-3166	94	7	90(7	90(7	NUM
fcis-3166	94	8	):	):	PUNCT
fcis-3166	94	9	393	393	NUM
fcis-3166	94	10	.	.	PUNCT
fcis-3166	95	1	[	[	X
fcis-3166	95	2	13	13	NUM
fcis-3166	95	3	]	]	X
fcis-3166	95	4	zhang	zhang	PROPN
fcis-3166	95	5	x	x	PUNCT
fcis-3166	95	6	c	c	X
fcis-3166	95	7	,	,	PUNCT
fcis-3166	95	8	qian	qian	PROPN
fcis-3166	95	9	j	j	PROPN
fcis-3166	95	10	,	,	PUNCT
fcis-3166	95	11	fu	fu	PROPN
fcis-3166	95	12	q	q	PROPN
fcis-3166	95	13	,	,	PUNCT
fcis-3166	95	14	et	et	PROPN
fcis-3166	95	15	al	al	PROPN
fcis-3166	95	16	.	.	PUNCT
fcis-3166	96	1	cutting	cut	VERB
fcis-3166	96	2	of	of	ADP
fcis-3166	96	3	pbo	pbo	NOUN
fcis-3166	96	4	fiberreinforced	fiberreinforce	VERB
fcis-3166	96	5	composites	composite	NOUN
fcis-3166	96	6	using	use	VERB
fcis-3166	96	7	picosecond	picosecond	NOUN
fcis-3166	96	8	lasers[j	lasers[j	PROPN
fcis-3166	96	9	]	]	PUNCT
fcis-3166	96	10	.	.	PUNCT
fcis-3166	97	1	chinese	chinese	ADJ
fcis-3166	97	2	journal	journal	PROPN
fcis-3166	97	3	of	of	ADP
fcis-3166	97	4	lasers	laser	NOUN
fcis-3166	97	5	,	,	PUNCT
fcis-3166	97	6	2020	2020	NUM
fcis-3166	97	7	,	,	PUNCT
fcis-3166	97	8	47(10	47(10	NUM
fcis-3166	97	9	):	):	PUNCT
fcis-3166	97	10	1002004	1002004	NUM
fcis-3166	97	11	.	.	PUNCT
fcis-3166	98	1	[	[	X
fcis-3166	98	2	14	14	NUM
fcis-3166	98	3	]	]	X
fcis-3166	98	4	zhang	zhang	PROPN
fcis-3166	98	5	xuecong	xuecong	PROPN
fcis-3166	98	6	,	,	PUNCT
fcis-3166	98	7	qian	qian	PROPN
fcis-3166	98	8	jing	jing	PROPN
fcis-3166	98	9	,	,	PUNCT
fcis-3166	98	10	fu	fu	PROPN
fcis-3166	98	11	qiang	qiang	PROPN
fcis-3166	98	12	,	,	PUNCT
fcis-3166	98	13	et	et	PROPN
fcis-3166	99	1	al	al	PROPN
fcis-3166	99	2	.	.	PROPN
fcis-3166	99	3	picosecond	picosecond	NOUN
fcis-3166	99	4	laser	laser	NOUN
fcis-3166	99	5	cutting	cutting	NOUN
fcis-3166	99	6	of	of	ADP
fcis-3166	99	7	pbo	pbo	NOUN
fcis-3166	99	8	fiber	fiber	NOUN
fcis-3166	99	9	reinforced	reinforce	VERB
fcis-3166	99	10	composites	composite	NOUN
fcis-3166	99	11	[	[	X
fcis-3166	99	12	j	j	X
fcis-3166	99	13	]	]	X
fcis-3166	99	14	.	.	PUNCT
fcis-3166	100	1	chinese	chinese	ADJ
fcis-3166	100	2	journal	journal	PROPN
fcis-3166	100	3	of	of	ADP
fcis-3166	100	4	lasers	laser	NOUN
fcis-3166	100	5	,	,	PUNCT
fcis-3166	100	6	2020	2020	NUM
fcis-3166	100	7	,	,	PUNCT
fcis-3166	100	8	20	20	NUM
fcis-3166	100	9	(	(	PUNCT
fcis-3166	100	10	2	2	NUM
fcis-3166	100	11	)	)	PUNCT
fcis-3166	100	12	:	:	PUNCT
fcis-3166	100	13	59	59	NUM
fcis-3166	100	14	-	-	SYM
fcis-3166	100	15	60.47	60.47	NUM
fcis-3166	100	16	(	(	PUNCT
fcis-3166	100	17	10	10	NUM
fcis-3166	100	18	)	)	PUNCT
fcis-3166	100	19	:	:	PUNCT
fcis-3166	100	20	1002004	1002004	NUM
fcis-3166	100	21	.	.	PUNCT
fcis-3166	101	1	[	[	X
fcis-3166	101	2	15	15	NUM
fcis-3166	101	3	]	]	X
fcis-3166	101	4	de	de	PROPN
fcis-3166	101	5	leon	leon	PROPN
fcis-3166	101	6	a	a	PROPN
fcis-3166	101	7	c	c	PROPN
fcis-3166	101	8	,	,	PUNCT
fcis-3166	101	9	chen	chen	PROPN
fcis-3166	101	10	q	q	PROPN
fcis-3166	101	11	,	,	PUNCT
fcis-3166	101	12	palaganas	palaganas	PROPN
fcis-3166	101	13	n	n	PROPN
fcis-3166	101	14	b	b	PROPN
fcis-3166	101	15	,	,	PUNCT
fcis-3166	101	16	et	et	PROPN
fcis-3166	101	17	al	al	PROPN
fcis-3166	101	18	.	.	PROPN
fcis-3166	101	19	high	high	ADJ
fcis-3166	101	20	performance	performance	NOUN
fcis-3166	101	21	polymer	polymer	NOUN
fcis-3166	101	22	nanocomposites	nanocomposite	NOUN
fcis-3166	101	23	for	for	ADP
fcis-3166	101	24	additive	additive	ADJ
fcis-3166	101	25	manufacturing	manufacturing	NOUN
fcis-3166	101	26	applications[j	applications[j	NOUN
fcis-3166	101	27	]	]	PUNCT
fcis-3166	101	28	.	.	PUNCT
fcis-3166	102	1	reactive	reactive	PROPN
fcis-3166	102	2	&	&	CCONJ
fcis-3166	102	3	functional	functional	ADJ
fcis-3166	102	4	polymers	polymer	NOUN
fcis-3166	102	5	,	,	PUNCT
fcis-3166	102	6	2016	2016	NUM
fcis-3166	102	7	,	,	PUNCT
fcis-3166	102	8	103(6.):141	103(6.):141	NUM
fcis-3166	102	9	-	-	SYM
fcis-3166	102	10	155	155	NUM
fcis-3166	102	11	.	.	PUNCT
fcis-3166	103	1	[	[	X
fcis-3166	103	2	16	16	NUM
fcis-3166	103	3	]	]	X
fcis-3166	103	4	mazumder	mazumder	PROPN
fcis-3166	103	5	j	j	PROPN
fcis-3166	103	6	,	,	PUNCT
fcis-3166	103	7	dutta	dutta	PROPN
fcis-3166	103	8	d	d	PROPN
fcis-3166	103	9	,	,	PUNCT
fcis-3166	103	10	kikuchi	kikuchi	PROPN
fcis-3166	103	11	n	n	CCONJ
fcis-3166	103	12	,	,	PUNCT
fcis-3166	103	13	et	et	PROPN
fcis-3166	103	14	al	al	PROPN
fcis-3166	103	15	.	.	PROPN
fcis-3166	103	16	closed	closed	PROPN
fcis-3166	103	17	loop	loop	NOUN
fcis-3166	103	18	direct	direct	ADJ
fcis-3166	103	19	metal	metal	NOUN
fcis-3166	103	20	deposition	deposition	NOUN
fcis-3166	103	21	:	:	PUNCT
fcis-3166	103	22	art	art	NOUN
fcis-3166	103	23	to	to	ADP
fcis-3166	103	24	part[j].optics	part[j].optic	NOUN
fcis-3166	103	25	&	&	CCONJ
fcis-3166	103	26	lasers	laser	NOUN
fcis-3166	103	27	in	in	ADP
fcis-3166	103	28	engineering	engineering	NOUN
fcis-3166	103	29	,	,	PUNCT
fcis-3166	103	30	2000	2000	NUM
fcis-3166	103	31	,	,	PUNCT
fcis-3166	103	32	34(4	34(4	NUM
fcis-3166	103	33	-	-	SYM
fcis-3166	103	34	6	6	NUM
fcis-3166	103	35	):	):	PUNCT
fcis-3166	103	36	397	397	NUM
fcis-3166	103	37	-	-	SYM
fcis-3166	103	38	414	414	NUM
fcis-3166	103	39	.	.	PUNCT
fcis-3166	104	1	[	[	X
fcis-3166	104	2	17	17	NUM
fcis-3166	104	3	]	]	PUNCT
fcis-3166	104	4	samant	samant	NOUN
fcis-3166	104	5	a	a	DET
fcis-3166	104	6	n	n	NOUN
fcis-3166	104	7	,	,	PUNCT
fcis-3166	104	8	dahotre	dahotre	PROPN
fcis-3166	104	9	n	n	PROPN
fcis-3166	104	10	b.	b.	PROPN
fcis-3166	104	11	laser	laser	PROPN
fcis-3166	104	12	machining	machining	NOUN
fcis-3166	104	13	of	of	ADP
fcis-3166	104	14	structural	structural	ADJ
fcis-3166	104	15	ceramics	ceramic	NOUN
fcis-3166	104	16	-a	-a	PUNCT
fcis-3166	104	17	review[j	review[j	PROPN
fcis-3166	104	18	]	]	PUNCT
fcis-3166	104	19	.	.	PUNCT
fcis-3166	105	1	journal	journal	PROPN
fcis-3166	105	2	of	of	ADP
fcis-3166	105	3	ceramics	ceramic	NOUN
fcis-3166	105	4	the	the	DET
fcis-3166	105	5	european	european	PROPN
fcis-3166	105	6	ceramic	ceramic	PROPN
fcis-3166	105	7	society	society	NOUN
fcis-3166	105	8	,	,	PUNCT
fcis-3166	105	9	2009	2009	NUM
fcis-3166	105	10	,	,	PUNCT
fcis-3166	105	11	29	29	NUM
fcis-3166	105	12	(	(	PUNCT
fcis-3166	105	13	6	6	NUM
fcis-3166	105	14	):	):	PUNCT
fcis-3166	105	15	969	969	NUM
fcis-3166	105	16	-	-	SYM
fcis-3166	105	17	993	993	NUM
fcis-3166	105	18	.	.	PUNCT