id	sid	tid	token	lemma	pos
fcis-5200	1	1	frontiers	frontier	NOUN
fcis-5200	1	2	in	in	ADP
fcis-5200	1	3	computing	computing	NOUN
fcis-5200	1	4	and	and	CCONJ
fcis-5200	1	5	intelligent	intelligent	ADJ
fcis-5200	1	6	systems	system	NOUN
fcis-5200	1	7	issn	issn	VERB
fcis-5200	1	8	:	:	PUNCT
fcis-5200	1	9	2832	2832	NUM
fcis-5200	1	10	-	-	SYM
fcis-5200	1	11	6024	6024	NUM
fcis-5200	1	12	|	|	NOUN
fcis-5200	1	13	vol	vol	NOUN
fcis-5200	1	14	.	.	PROPN
fcis-5200	2	1	2	2	NUM
fcis-5200	2	2	,	,	PUNCT
fcis-5200	2	3	no	no	INTJ
fcis-5200	2	4	.	.	NOUN
fcis-5200	2	5	3	3	NUM
fcis-5200	2	6	,	,	PUNCT
fcis-5200	2	7	2022	2022	NUM
fcis-5200	2	8	4	4	NUM
fcis-5200	2	9	research	research	NOUN
fcis-5200	2	10	and	and	CCONJ
fcis-5200	2	11	application	application	NOUN
fcis-5200	2	12	of	of	ADP
fcis-5200	2	13	digital	digital	ADJ
fcis-5200	2	14	technology	technology	NOUN
fcis-5200	2	15	of	of	ADP
fcis-5200	2	16	film	film	NOUN
fcis-5200	2	17	coating	coating	NOUN
fcis-5200	2	18	equipment	equipment	NOUN
fcis-5200	2	19	luming	lume	VERB
fcis-5200	2	20	liu	liu	PROPN
fcis-5200	2	21	,	,	PUNCT
fcis-5200	2	22	qingq	qingq	PROPN
fcis-5200	2	23	yang	yang	PROPN
fcis-5200	2	24	*	*	PROPN
fcis-5200	2	25	,	,	PUNCT
fcis-5200	2	26	zewei	zewei	PROPN
fcis-5200	2	27	zhu	zhu	PROPN
fcis-5200	3	1	the	the	DET
fcis-5200	3	2	institute	institute	PROPN
fcis-5200	3	3	of	of	ADP
fcis-5200	3	4	intelligent	intelligent	ADJ
fcis-5200	3	5	manufacturing	manufacturing	NOUN
fcis-5200	3	6	,	,	PUNCT
fcis-5200	3	7	wenzhou	wenzhou	PROPN
fcis-5200	3	8	polytechnic	polytechnic	PROPN
fcis-5200	3	9	,	,	PUNCT
fcis-5200	3	10	wenzhou	wenzhou	PROPN
fcis-5200	3	11	325035	325035	NUM
fcis-5200	3	12	,	,	PUNCT
fcis-5200	3	13	china	china	PROPN
fcis-5200	3	14	*	*	PUNCT
fcis-5200	3	15	corresponding	correspond	VERB
fcis-5200	3	16	author	author	NOUN
fcis-5200	3	17	:	:	PUNCT
fcis-5200	3	18	qingq	qingq	PROPN
fcis-5200	3	19	yang	yang	PROPN
fcis-5200	3	20	(	(	PUNCT
fcis-5200	3	21	email	email	NOUN
fcis-5200	3	22	:	:	PUNCT
fcis-5200	3	23	qqyang@wzpt.edu.cn	qqyang@wzpt.edu.cn	NOUN
fcis-5200	3	24	)	)	PUNCT
fcis-5200	3	25	abstract	abstract	NOUN
fcis-5200	3	26	:	:	PUNCT
fcis-5200	3	27	at	at	ADP
fcis-5200	3	28	present	present	ADJ
fcis-5200	3	29	,	,	PUNCT
fcis-5200	3	30	most	most	ADJ
fcis-5200	3	31	of	of	ADP
fcis-5200	3	32	the	the	DET
fcis-5200	3	33	coating	coating	NOUN
fcis-5200	3	34	production	production	NOUN
fcis-5200	3	35	still	still	ADV
fcis-5200	3	36	adopts	adopt	VERB
fcis-5200	3	37	relatively	relatively	ADV
fcis-5200	3	38	backward	backward	ADJ
fcis-5200	3	39	traditional	traditional	ADJ
fcis-5200	3	40	methods	method	NOUN
fcis-5200	3	41	,	,	PUNCT
fcis-5200	3	42	there	there	PRON
fcis-5200	3	43	are	be	VERB
fcis-5200	3	44	its	its	PRON
fcis-5200	3	45	equipment	equipment	NOUN
fcis-5200	3	46	status	status	NOUN
fcis-5200	3	47	,	,	PUNCT
fcis-5200	3	48	operation	operation	NOUN
fcis-5200	3	49	,	,	PUNCT
fcis-5200	3	50	production	production	NOUN
fcis-5200	3	51	,	,	PUNCT
fcis-5200	3	52	repair	repair	NOUN
fcis-5200	3	53	and	and	CCONJ
fcis-5200	3	54	maintenance	maintenance	NOUN
fcis-5200	3	55	information	information	NOUN
fcis-5200	3	56	of	of	ADP
fcis-5200	3	57	digital	digital	ADJ
fcis-5200	3	58	technology	technology	NOUN
fcis-5200	3	59	application	application	NOUN
fcis-5200	3	60	less	less	ADJ
fcis-5200	3	61	problems	problem	NOUN
fcis-5200	3	62	.	.	PUNCT
fcis-5200	4	1	in	in	ADP
fcis-5200	4	2	view	view	NOUN
fcis-5200	4	3	of	of	ADP
fcis-5200	4	4	this	this	DET
fcis-5200	4	5	problem	problem	NOUN
fcis-5200	4	6	,	,	PUNCT
fcis-5200	4	7	a	a	DET
fcis-5200	4	8	data	data	NOUN
fcis-5200	4	9	acquisition	acquisition	NOUN
fcis-5200	4	10	module	module	NOUN
fcis-5200	4	11	and	and	CCONJ
fcis-5200	4	12	data	data	NOUN
fcis-5200	4	13	processing	processing	NOUN
fcis-5200	4	14	system	system	NOUN
fcis-5200	4	15	are	be	AUX
fcis-5200	4	16	developed	develop	VERB
fcis-5200	4	17	to	to	PART
fcis-5200	4	18	realize	realize	VERB
fcis-5200	4	19	the	the	DET
fcis-5200	4	20	data	datum	NOUN
fcis-5200	4	21	acquisition	acquisition	NOUN
fcis-5200	4	22	and	and	CCONJ
fcis-5200	4	23	real	real	ADJ
fcis-5200	4	24	-	-	PUNCT
fcis-5200	4	25	time	time	NOUN
fcis-5200	4	26	monitoring	monitoring	NOUN
fcis-5200	4	27	of	of	ADP
fcis-5200	4	28	the	the	DET
fcis-5200	4	29	equipment	equipment	NOUN
fcis-5200	4	30	temperature	temperature	NOUN
fcis-5200	4	31	,	,	PUNCT
fcis-5200	4	32	vacuum	vacuum	NOUN
fcis-5200	4	33	degree	degree	NOUN
fcis-5200	4	34	,	,	PUNCT
fcis-5200	4	35	rotation	rotation	NOUN
fcis-5200	4	36	speed	speed	NOUN
fcis-5200	4	37	,	,	PUNCT
fcis-5200	4	38	target	target	NOUN
fcis-5200	4	39	material	material	NOUN
fcis-5200	4	40	,	,	PUNCT
fcis-5200	4	41	film	film	NOUN
fcis-5200	4	42	thickness	thickness	NOUN
fcis-5200	4	43	and	and	CCONJ
fcis-5200	4	44	surface	surface	NOUN
fcis-5200	4	45	condition	condition	NOUN
fcis-5200	4	46	.	.	PUNCT
fcis-5200	5	1	the	the	DET
fcis-5200	5	2	data	data	NOUN
fcis-5200	5	3	acquisition	acquisition	NOUN
fcis-5200	5	4	module	module	NOUN
fcis-5200	5	5	consists	consist	VERB
fcis-5200	5	6	of	of	ADP
fcis-5200	5	7	a	a	DET
fcis-5200	5	8	self	self	NOUN
fcis-5200	5	9	-	-	PUNCT
fcis-5200	5	10	organized	organize	VERB
fcis-5200	5	11	network	network	NOUN
fcis-5200	5	12	system	system	NOUN
fcis-5200	5	13	formed	form	VERB
fcis-5200	5	14	by	by	ADP
fcis-5200	5	15	the	the	DET
fcis-5200	5	16	sensor	sensor	NOUN
fcis-5200	5	17	nodes	node	NOUN
fcis-5200	5	18	deployed	deploy	VERB
fcis-5200	5	19	in	in	ADP
fcis-5200	5	20	the	the	DET
fcis-5200	5	21	detection	detection	NOUN
fcis-5200	5	22	area	area	NOUN
fcis-5200	5	23	and	and	CCONJ
fcis-5200	5	24	installed	instal	VERB
fcis-5200	5	25	on	on	ADP
fcis-5200	5	26	the	the	DET
fcis-5200	5	27	device	device	NOUN
fcis-5200	5	28	,	,	PUNCT
fcis-5200	5	29	combined	combine	VERB
fcis-5200	5	30	with	with	ADP
fcis-5200	5	31	/	/	SYM
fcis-5200	5	32	wireless	wireless	ADJ
fcis-5200	5	33	communication	communication	NOUN
fcis-5200	5	34	.	.	PUNCT
fcis-5200	6	1	through	through	ADP
fcis-5200	6	2	the	the	DET
fcis-5200	6	3	development	development	NOUN
fcis-5200	6	4	of	of	ADP
fcis-5200	6	5	the	the	DET
fcis-5200	6	6	system	system	NOUN
fcis-5200	6	7	to	to	PART
fcis-5200	6	8	achieve	achieve	VERB
fcis-5200	6	9	the	the	DET
fcis-5200	6	10	digital	digital	ADJ
fcis-5200	6	11	and	and	CCONJ
fcis-5200	6	12	intelligent	intelligent	ADJ
fcis-5200	6	13	application	application	NOUN
fcis-5200	6	14	of	of	ADP
fcis-5200	6	15	coating	coating	NOUN
fcis-5200	6	16	equipment	equipment	NOUN
fcis-5200	6	17	.	.	PUNCT
fcis-5200	7	1	keywords	keyword	NOUN
fcis-5200	7	2	:	:	PUNCT
fcis-5200	7	3	internet	internet	NOUN
fcis-5200	7	4	of	of	ADP
fcis-5200	7	5	things	thing	NOUN
fcis-5200	7	6	;	;	PUNCT
fcis-5200	7	7	digital	digital	PROPN
fcis-5200	7	8	;	;	PUNCT
fcis-5200	7	9	plc	plc	PROPN
fcis-5200	7	10	;	;	PUNCT
fcis-5200	7	11	coating	coat	VERB
fcis-5200	7	12	equipment	equipment	NOUN
fcis-5200	7	13	.	.	PUNCT
fcis-5200	8	1	1	1	X
fcis-5200	8	2	.	.	X
fcis-5200	8	3	introduction	introduction	NOUN
fcis-5200	8	4	as	as	ADP
fcis-5200	8	5	an	an	DET
fcis-5200	8	6	emerging	emerge	VERB
fcis-5200	8	7	technology	technology	NOUN
fcis-5200	8	8	,	,	PUNCT
fcis-5200	8	9	the	the	DET
fcis-5200	8	10	industrial	industrial	ADJ
fcis-5200	8	11	internet	internet	NOUN
fcis-5200	8	12	of	of	ADP
fcis-5200	8	13	things	thing	NOUN
fcis-5200	8	14	(	(	PUNCT
fcis-5200	8	15	iiot	iiot	NOUN
fcis-5200	8	16	)	)	PUNCT
fcis-5200	8	17	,	,	PUNCT
fcis-5200	8	18	can	can	AUX
fcis-5200	8	19	promote	promote	VERB
fcis-5200	8	20	the	the	DET
fcis-5200	8	21	development	development	NOUN
fcis-5200	8	22	of	of	ADP
fcis-5200	8	23	industrial	industrial	ADJ
fcis-5200	8	24	intelligence	intelligence	NOUN
fcis-5200	8	25	,	,	PUNCT
fcis-5200	8	26	improve	improve	VERB
fcis-5200	8	27	production	production	NOUN
fcis-5200	8	28	efficiency	efficiency	NOUN
fcis-5200	8	29	,	,	PUNCT
fcis-5200	8	30	and	and	CCONJ
fcis-5200	8	31	reduce	reduce	VERB
fcis-5200	8	32	manufacturing	manufacturing	NOUN
fcis-5200	8	33	costs	cost	NOUN
fcis-5200	8	34	.	.	PUNCT
fcis-5200	9	1	under	under	ADP
fcis-5200	9	2	the	the	DET
fcis-5200	9	3	background	background	NOUN
fcis-5200	9	4	of	of	ADP
fcis-5200	9	5	the	the	DET
fcis-5200	9	6	information	information	NOUN
fcis-5200	9	7	development	development	NOUN
fcis-5200	9	8	characterized	characterize	VERB
fcis-5200	9	9	by	by	ADP
fcis-5200	9	10	digitalization	digitalization	NOUN
fcis-5200	9	11	,	,	PUNCT
fcis-5200	9	12	networking	networking	NOUN
fcis-5200	9	13	and	and	CCONJ
fcis-5200	9	14	intelligence	intelligence	NOUN
fcis-5200	9	15	,	,	PUNCT
fcis-5200	9	16	the	the	DET
fcis-5200	9	17	intelligence	intelligence	NOUN
fcis-5200	9	18	degree	degree	NOUN
fcis-5200	9	19	of	of	ADP
fcis-5200	9	20	enterprises	enterprise	NOUN
fcis-5200	9	21	has	have	AUX
fcis-5200	9	22	been	be	AUX
fcis-5200	9	23	improved	improve	VERB
fcis-5200	9	24	,	,	PUNCT
fcis-5200	9	25	which	which	PRON
fcis-5200	9	26	provides	provide	VERB
fcis-5200	9	27	a	a	DET
fcis-5200	9	28	large	large	ADJ
fcis-5200	9	29	amount	amount	NOUN
fcis-5200	9	30	of	of	ADP
fcis-5200	9	31	data	datum	NOUN
fcis-5200	9	32	for	for	ADP
fcis-5200	9	33	the	the	DET
fcis-5200	9	34	predictive	predictive	ADJ
fcis-5200	9	35	maintenance	maintenance	NOUN
fcis-5200	9	36	and	and	CCONJ
fcis-5200	9	37	abnormal	abnormal	ADJ
fcis-5200	9	38	monitoring	monitoring	NOUN
fcis-5200	9	39	of	of	ADP
fcis-5200	9	40	the	the	DET
fcis-5200	9	41	production	production	NOUN
fcis-5200	9	42	and	and	CCONJ
fcis-5200	9	43	manufacturing	manufacturing	NOUN
fcis-5200	9	44	process	process	NOUN
fcis-5200	9	45	.	.	PUNCT
fcis-5200	10	1	at	at	ADP
fcis-5200	10	2	present	present	ADJ
fcis-5200	10	3	,	,	PUNCT
fcis-5200	10	4	the	the	DET
fcis-5200	10	5	digital	digital	ADJ
fcis-5200	10	6	transformation	transformation	NOUN
fcis-5200	10	7	of	of	ADP
fcis-5200	10	8	enterprises	enterprise	NOUN
fcis-5200	10	9	is	be	AUX
fcis-5200	10	10	mainly	mainly	ADV
fcis-5200	10	11	faced	face	VERB
fcis-5200	10	12	with	with	ADP
fcis-5200	10	13	a	a	DET
fcis-5200	10	14	large	large	ADJ
fcis-5200	10	15	number	number	NOUN
fcis-5200	10	16	of	of	ADP
fcis-5200	10	17	equipment	equipment	NOUN
fcis-5200	10	18	and	and	CCONJ
fcis-5200	10	19	systems	system	NOUN
fcis-5200	10	20	existing	exist	VERB
fcis-5200	10	21	inside	inside	ADP
fcis-5200	10	22	the	the	DET
fcis-5200	10	23	factory	factory	NOUN
fcis-5200	10	24	,	,	PUNCT
fcis-5200	10	25	but	but	CCONJ
fcis-5200	10	26	each	each	DET
fcis-5200	10	27	system	system	NOUN
fcis-5200	10	28	is	be	AUX
fcis-5200	10	29	independent	independent	ADJ
fcis-5200	10	30	of	of	ADP
fcis-5200	10	31	each	each	DET
fcis-5200	10	32	other	other	ADJ
fcis-5200	10	33	and	and	CCONJ
fcis-5200	10	34	has	have	VERB
fcis-5200	10	35	different	different	ADJ
fcis-5200	10	36	standards	standard	NOUN
fcis-5200	10	37	,	,	PUNCT
fcis-5200	10	38	data	datum	NOUN
fcis-5200	10	39	sources	source	NOUN
fcis-5200	10	40	are	be	AUX
fcis-5200	10	41	incomplete	incomplete	ADJ
fcis-5200	10	42	and	and	CCONJ
fcis-5200	10	43	not	not	PART
fcis-5200	10	44	"	"	PUNCT
fcis-5200	10	45	clean	clean	ADJ
fcis-5200	10	46	"	"	PUNCT
fcis-5200	10	47	,	,	PUNCT
fcis-5200	10	48	and	and	CCONJ
fcis-5200	10	49	there	there	PRON
fcis-5200	10	50	are	be	VERB
fcis-5200	10	51	serious	serious	ADJ
fcis-5200	10	52	"	"	PUNCT
fcis-5200	10	53	data	data	NOUN
fcis-5200	10	54	island	island	NOUN
fcis-5200	10	55	"	"	PUNCT
fcis-5200	10	56	problems	problem	NOUN
fcis-5200	10	57	between	between	ADP
fcis-5200	10	58	different	different	ADJ
fcis-5200	10	59	systems	system	NOUN
fcis-5200	10	60	.	.	PUNCT
fcis-5200	11	1	the	the	DET
fcis-5200	11	2	data	datum	NOUN
fcis-5200	11	3	is	be	AUX
fcis-5200	11	4	characterized	characterize	VERB
fcis-5200	11	5	by	by	ADP
fcis-5200	11	6	multi	multi	ADJ
fcis-5200	11	7	-	-	NOUN
fcis-5200	11	8	source	source	NOUN
fcis-5200	11	9	,	,	PUNCT
fcis-5200	11	10	heterogeneous	heterogeneous	ADJ
fcis-5200	11	11	and	and	CCONJ
fcis-5200	11	12	incomplete	incomplete	ADJ
fcis-5200	11	13	data	datum	NOUN
fcis-5200	12	1	[	[	X
fcis-5200	12	2	1	1	NUM
fcis-5200	12	3	]	]	PUNCT
fcis-5200	12	4	,	,	PUNCT
fcis-5200	12	5	how	how	SCONJ
fcis-5200	12	6	to	to	PART
fcis-5200	12	7	deeply	deeply	ADV
fcis-5200	12	8	explore	explore	VERB
fcis-5200	12	9	the	the	DET
fcis-5200	12	10	value	value	NOUN
fcis-5200	12	11	of	of	ADP
fcis-5200	12	12	data	datum	NOUN
fcis-5200	12	13	,	,	PUNCT
fcis-5200	12	14	and	and	CCONJ
fcis-5200	12	15	use	use	VERB
fcis-5200	12	16	it	it	PRON
fcis-5200	12	17	for	for	ADP
fcis-5200	12	18	process	process	NOUN
fcis-5200	12	19	optimization	optimization	NOUN
fcis-5200	12	20	,	,	PUNCT
fcis-5200	12	21	fault	fault	VERB
fcis-5200	12	22	prevention	prevention	NOUN
fcis-5200	12	23	and	and	CCONJ
fcis-5200	12	24	diagnosis	diagnosis	NOUN
fcis-5200	12	25	,	,	PUNCT
fcis-5200	12	26	parameter	parameter	NOUN
fcis-5200	12	27	optimization	optimization	NOUN
fcis-5200	12	28	and	and	CCONJ
fcis-5200	12	29	other	other	ADJ
fcis-5200	12	30	applications	application	NOUN
fcis-5200	12	31	,	,	PUNCT
fcis-5200	12	32	has	have	AUX
fcis-5200	12	33	become	become	VERB
fcis-5200	12	34	a	a	DET
fcis-5200	12	35	difficult	difficult	ADJ
fcis-5200	12	36	problem	problem	NOUN
fcis-5200	12	37	for	for	SCONJ
fcis-5200	12	38	enterprises	enterprise	NOUN
fcis-5200	12	39	to	to	PART
fcis-5200	12	40	overcome	overcome	VERB
fcis-5200	12	41	in	in	ADP
fcis-5200	12	42	safe	safe	ADJ
fcis-5200	12	43	production	production	NOUN
fcis-5200	12	44	,	,	PUNCT
fcis-5200	12	45	efficient	efficient	ADJ
fcis-5200	12	46	production	production	NOUN
fcis-5200	12	47	and	and	CCONJ
fcis-5200	12	48	high	high	ADJ
fcis-5200	12	49	-	-	PUNCT
fcis-5200	12	50	quality	quality	NOUN
fcis-5200	12	51	production	production	NOUN
fcis-5200	12	52	.	.	PUNCT
fcis-5200	13	1	in	in	ADP
fcis-5200	13	2	the	the	DET
fcis-5200	13	3	industrial	industrial	ADJ
fcis-5200	13	4	internet	internet	NOUN
fcis-5200	13	5	of	of	ADP
fcis-5200	13	6	things	thing	NOUN
fcis-5200	13	7	,	,	PUNCT
fcis-5200	13	8	the	the	DET
fcis-5200	13	9	improvement	improvement	NOUN
fcis-5200	13	10	and	and	CCONJ
fcis-5200	13	11	progress	progress	NOUN
fcis-5200	13	12	of	of	ADP
fcis-5200	13	13	safety	safety	NOUN
fcis-5200	13	14	production	production	NOUN
fcis-5200	13	15	and	and	CCONJ
fcis-5200	13	16	production	production	NOUN
fcis-5200	13	17	technology	technology	NOUN
fcis-5200	13	18	can	can	AUX
fcis-5200	13	19	not	not	PART
fcis-5200	13	20	be	be	AUX
fcis-5200	13	21	separated	separate	VERB
fcis-5200	13	22	from	from	ADP
fcis-5200	13	23	data	datum	NOUN
fcis-5200	13	24	fusion	fusion	NOUN
fcis-5200	13	25	,	,	PUNCT
fcis-5200	13	26	which	which	PRON
fcis-5200	13	27	is	be	AUX
fcis-5200	13	28	the	the	DET
fcis-5200	13	29	process	process	NOUN
fcis-5200	13	30	of	of	ADP
fcis-5200	13	31	realizing	realize	VERB
fcis-5200	13	32	the	the	DET
fcis-5200	13	33	collection	collection	NOUN
fcis-5200	13	34	,	,	PUNCT
fcis-5200	13	35	analysis	analysis	NOUN
fcis-5200	13	36	and	and	CCONJ
fcis-5200	13	37	processing	processing	NOUN
fcis-5200	13	38	of	of	ADP
fcis-5200	13	39	massive	massive	ADJ
fcis-5200	13	40	internet	internet	NOUN
fcis-5200	13	41	of	of	ADP
fcis-5200	13	42	things	thing	NOUN
fcis-5200	13	43	data	datum	NOUN
fcis-5200	13	44	generated	generate	VERB
fcis-5200	13	45	by	by	ADP
fcis-5200	13	46	industrial	industrial	ADJ
fcis-5200	13	47	equipment	equipment	NOUN
fcis-5200	13	48	and	and	CCONJ
fcis-5200	13	49	systems	system	NOUN
fcis-5200	13	50	[	[	X
fcis-5200	13	51	2	2	NUM
fcis-5200	13	52	]	]	PUNCT
fcis-5200	13	53	.	.	PUNCT
fcis-5200	14	1	the	the	DET
fcis-5200	14	2	data	datum	NOUN
fcis-5200	14	3	collected	collect	VERB
fcis-5200	14	4	in	in	ADP
fcis-5200	14	5	the	the	DET
fcis-5200	14	6	workshop	workshop	NOUN
fcis-5200	14	7	may	may	AUX
fcis-5200	14	8	cause	cause	VERB
fcis-5200	14	9	incomplete	incomplete	ADJ
fcis-5200	14	10	data	datum	NOUN
fcis-5200	14	11	due	due	ADP
fcis-5200	14	12	to	to	ADP
fcis-5200	14	13	improper	improper	ADJ
fcis-5200	14	14	operation	operation	NOUN
fcis-5200	14	15	,	,	PUNCT
fcis-5200	14	16	unstable	unstable	ADJ
fcis-5200	14	17	network	network	NOUN
fcis-5200	14	18	connection	connection	NOUN
fcis-5200	14	19	,	,	PUNCT
fcis-5200	14	20	sensor	sensor	NOUN
fcis-5200	14	21	failure	failure	NOUN
fcis-5200	14	22	,	,	PUNCT
fcis-5200	14	23	frequent	frequent	ADJ
fcis-5200	14	24	transmission	transmission	NOUN
fcis-5200	14	25	and	and	CCONJ
fcis-5200	14	26	other	other	ADJ
fcis-5200	14	27	reasons	reason	NOUN
fcis-5200	14	28	,	,	PUNCT
fcis-5200	14	29	thus	thus	ADV
fcis-5200	14	30	adversely	adversely	ADV
fcis-5200	14	31	affecting	affect	VERB
fcis-5200	14	32	the	the	DET
fcis-5200	14	33	safety	safety	NOUN
fcis-5200	14	34	,	,	PUNCT
fcis-5200	14	35	reliability	reliability	NOUN
fcis-5200	14	36	and	and	CCONJ
fcis-5200	14	37	accuracy	accuracy	NOUN
fcis-5200	14	38	of	of	ADP
fcis-5200	14	39	the	the	DET
fcis-5200	14	40	whole	whole	ADJ
fcis-5200	14	41	system	system	NOUN
fcis-5200	14	42	processing	processing	NOUN
fcis-5200	14	43	process	process	NOUN
fcis-5200	14	44	.	.	PUNCT
fcis-5200	15	1	using	use	VERB
fcis-5200	15	2	a	a	DET
fcis-5200	15	3	modified	modify	VERB
fcis-5200	15	4	random	random	ADJ
fcis-5200	15	5	forest	forest	NOUN
fcis-5200	15	6	algorithm	algorithm	NOUN
fcis-5200	15	7	based	base	VERB
fcis-5200	15	8	on	on	ADP
fcis-5200	15	9	the	the	DET
fcis-5200	15	10	decision	decision	NOUN
fcis-5200	15	11	pathway	pathway	NOUN
fcis-5200	15	12	to	to	PART
fcis-5200	15	13	compensate	compensate	VERB
fcis-5200	15	14	for	for	ADP
fcis-5200	15	15	the	the	DET
fcis-5200	15	16	effects	effect	NOUN
fcis-5200	15	17	of	of	ADP
fcis-5200	15	18	incomplete	incomplete	ADJ
fcis-5200	15	19	data	datum	NOUN
fcis-5200	15	20	,	,	PUNCT
fcis-5200	15	21	yuequn	yuequn	PROPN
fcis-5200	15	22	zhang	zhang	PROPN
fcis-5200	15	23	et	et	PROPN
fcis-5200	15	24	al[3	al[3	NOUN
fcis-5200	15	25	]	]	PUNCT
fcis-5200	15	26	.	.	PUNCT
fcis-5200	16	1	d	d	X
fcis-5200	16	2	adhikari	adhikari	PROPN
fcis-5200	16	3	et	et	PROPN
fcis-5200	16	4	al	al	PROPN
fcis-5200	16	5	.	.	PUNCT
fcis-5200	17	1	use	use	VERB
fcis-5200	17	2	information	information	NOUN
fcis-5200	17	3	fusion	fusion	NOUN
fcis-5200	17	4	technology	technology	NOUN
fcis-5200	17	5	for	for	ADP
fcis-5200	17	6	interpolation	interpolation	NOUN
fcis-5200	17	7	,	,	PUNCT
fcis-5200	17	8	and	and	CCONJ
fcis-5200	17	9	use	use	VERB
fcis-5200	17	10	the	the	DET
fcis-5200	17	11	ratio	ratio	NOUN
fcis-5200	17	12	-	-	PUNCT
fcis-5200	17	13	based	base	VERB
fcis-5200	17	14	interpolation	interpolation	NOUN
fcis-5200	17	15	(	(	PUNCT
fcis-5200	17	16	rbi	rbi	NOUN
fcis-5200	17	17	)	)	PUNCT
fcis-5200	17	18	algorithm	algorithm	NOUN
fcis-5200	17	19	to	to	PART
fcis-5200	17	20	deal	deal	VERB
fcis-5200	17	21	with	with	ADP
fcis-5200	17	22	high	high	ADJ
fcis-5200	17	23	rates	rate	NOUN
fcis-5200	17	24	of	of	ADP
fcis-5200	17	25	missing	miss	VERB
fcis-5200	17	26	data	datum	NOUN
fcis-5200	17	27	based	base	VERB
fcis-5200	17	28	on	on	ADP
fcis-5200	17	29	data	data	NOUN
fcis-5200	17	30	fusion	fusion	NOUN
fcis-5200	17	31	and	and	CCONJ
fcis-5200	17	32	data	data	NOUN
fcis-5200	17	33	mining	mining	NOUN
fcis-5200	17	34	methods	method	NOUN
fcis-5200	17	35	[	[	X
fcis-5200	17	36	4	4	NUM
fcis-5200	17	37	]	]	PUNCT
fcis-5200	17	38	.	.	PUNCT
fcis-5200	18	1	lai	lai	PROPN
fcis-5200	18	2	x	x	PUNCT
fcis-5200	18	3	et	et	PROPN
fcis-5200	18	4	al	al	PROPN
fcis-5200	18	5	.	.	PROPN
fcis-5200	18	6	used	use	VERB
fcis-5200	18	7	an	an	DET
fcis-5200	18	8	autoencoder	autoencoder	NOUN
fcis-5200	18	9	(	(	PUNCT
fcis-5200	18	10	ae	ae	PROPN
fcis-5200	18	11	)	)	PUNCT
fcis-5200	18	12	-based	-based	ADJ
fcis-5200	18	13	multi	multi	ADJ
fcis-5200	18	14	-	-	ADJ
fcis-5200	18	15	task	task	ADJ
fcis-5200	18	16	learning	learning	NOUN
fcis-5200	18	17	(	(	PUNCT
fcis-5200	18	18	mtl	mtl	PROPN
fcis-5200	18	19	)	)	PUNCT
fcis-5200	18	20	model	model	NOUN
fcis-5200	18	21	and	and	CCONJ
fcis-5200	18	22	dynamically	dynamically	ADV
fcis-5200	18	23	optimized	optimize	VERB
fcis-5200	18	24	missing	miss	VERB
fcis-5200	18	25	values	value	NOUN
fcis-5200	18	26	to	to	PART
fcis-5200	18	27	classify	classify	VERB
fcis-5200	18	28	incomplete	incomplete	ADJ
fcis-5200	18	29	data	datum	NOUN
fcis-5200	18	30	sets	set	NOUN
fcis-5200	18	31	with	with	ADP
fcis-5200	18	32	interdependencies	interdependency	NOUN
fcis-5200	18	33	among	among	ADP
fcis-5200	18	34	properties	property	NOUN
fcis-5200	18	35	[	[	X
fcis-5200	18	36	5	5	NUM
fcis-5200	18	37	]	]	PUNCT
fcis-5200	18	38	.	.	PUNCT
fcis-5200	19	1	in	in	ADP
fcis-5200	19	2	view	view	NOUN
fcis-5200	19	3	of	of	ADP
fcis-5200	19	4	the	the	DET
fcis-5200	19	5	problem	problem	NOUN
fcis-5200	19	6	of	of	ADP
fcis-5200	19	7	missing	miss	VERB
fcis-5200	19	8	industrial	industrial	ADJ
fcis-5200	19	9	data	datum	NOUN
fcis-5200	19	10	,	,	PUNCT
fcis-5200	19	11	han	han	PROPN
fcis-5200	19	12	li	li	PROPN
fcis-5200	19	13	et	et	PROPN
fcis-5200	19	14	al	al	PROPN
fcis-5200	19	15	.	.	PROPN
fcis-5200	19	16	identified	identify	VERB
fcis-5200	19	17	and	and	CCONJ
fcis-5200	19	18	classified	classified	ADJ
fcis-5200	19	19	samples	sample	NOUN
fcis-5200	19	20	,	,	PUNCT
fcis-5200	19	21	established	establish	VERB
fcis-5200	19	22	local	local	ADJ
fcis-5200	19	23	interpolation	interpolation	NOUN
fcis-5200	19	24	models	model	NOUN
fcis-5200	19	25	,	,	PUNCT
fcis-5200	19	26	and	and	CCONJ
fcis-5200	19	27	proposed	propose	VERB
fcis-5200	19	28	a	a	DET
fcis-5200	19	29	framework	framework	NOUN
fcis-5200	19	30	based	base	VERB
fcis-5200	19	31	on	on	ADP
fcis-5200	19	32	engineering	engineering	NOUN
fcis-5200	19	33	field	field	NOUN
fcis-5200	19	34	knowledge	knowledge	NOUN
fcis-5200	19	35	for	for	ADP
fcis-5200	19	36	modeling	model	VERB
fcis-5200	19	37	incomplete	incomplete	ADJ
fcis-5200	19	38	industrial	industrial	ADJ
fcis-5200	19	39	data	datum	NOUN
fcis-5200	20	1	[	[	X
fcis-5200	20	2	6	6	NUM
fcis-5200	20	3	]	]	PUNCT
fcis-5200	20	4	.	.	PUNCT
fcis-5200	21	1	c	c	PROPN
fcis-5200	21	2	peng	peng	PROPN
fcis-5200	21	3	et	et	PROPN
fcis-5200	21	4	al	al	PROPN
fcis-5200	21	5	proposed	propose	VERB
fcis-5200	21	6	a	a	DET
fcis-5200	21	7	reliability	reliability	NOUN
fcis-5200	21	8	model	model	NOUN
fcis-5200	21	9	based	base	VERB
fcis-5200	21	10	on	on	ADP
fcis-5200	21	11	multi	multi	ADJ
fcis-5200	21	12	-	-	ADJ
fcis-5200	21	13	source	source	ADJ
fcis-5200	21	14	information	information	NOUN
fcis-5200	21	15	fusion	fusion	NOUN
fcis-5200	21	16	to	to	PART
fcis-5200	21	17	study	study	VERB
fcis-5200	21	18	the	the	DET
fcis-5200	21	19	reliability	reliability	NOUN
fcis-5200	21	20	of	of	ADP
fcis-5200	21	21	cnc	cnc	PROPN
fcis-5200	21	22	systems[7	systems[7	PROPN
fcis-5200	21	23	]	]	X
fcis-5200	21	24	.	.	PUNCT
fcis-5200	22	1	in	in	ADP
fcis-5200	22	2	order	order	NOUN
fcis-5200	22	3	to	to	PART
fcis-5200	22	4	improve	improve	VERB
fcis-5200	22	5	the	the	DET
fcis-5200	22	6	processing	processing	NOUN
fcis-5200	22	7	stability	stability	NOUN
fcis-5200	22	8	and	and	CCONJ
fcis-5200	22	9	product	product	NOUN
fcis-5200	22	10	quality	quality	NOUN
fcis-5200	22	11	of	of	ADP
fcis-5200	22	12	the	the	DET
fcis-5200	22	13	workpiece	workpiece	NOUN
fcis-5200	22	14	,	,	PUNCT
fcis-5200	22	15	b	b	X
fcis-5200	22	16	w	w	NOUN
fcis-5200	22	17	ang	ang	INTJ
fcis-5200	22	18	et	et	PROPN
fcis-5200	22	19	al	al	PROPN
fcis-5200	22	20	.	.	PROPN
fcis-5200	22	21	proposed	propose	VERB
fcis-5200	22	22	a	a	DET
fcis-5200	22	23	signal	signal	ADJ
fcis-5200	22	24	feature	feature	NOUN
fcis-5200	22	25	evaluation	evaluation	NOUN
fcis-5200	22	26	model	model	NOUN
fcis-5200	22	27	and	and	CCONJ
fcis-5200	22	28	multi	multi	ADJ
fcis-5200	22	29	-	-	ADJ
fcis-5200	22	30	feature	feature	ADJ
fcis-5200	22	31	identification	identification	NOUN
fcis-5200	22	32	system	system	NOUN
fcis-5200	22	33	for	for	ADP
fcis-5200	22	34	vibration	vibration	NOUN
fcis-5200	22	35	vibration	vibration	NOUN
fcis-5200	22	36	detection	detection	NOUN
fcis-5200	22	37	to	to	PART
fcis-5200	22	38	improve	improve	VERB
fcis-5200	22	39	the	the	DET
fcis-5200	22	40	accuracy	accuracy	NOUN
fcis-5200	22	41	of	of	ADP
fcis-5200	22	42	machine	machine	NOUN
fcis-5200	22	43	vibration	vibration	NOUN
fcis-5200	22	44	detection	detection	NOUN
fcis-5200	22	45	[	[	X
fcis-5200	22	46	8	8	NUM
fcis-5200	22	47	]	]	PUNCT
fcis-5200	22	48	.	.	PUNCT
fcis-5200	23	1	the	the	DET
fcis-5200	23	2	energy	energy	NOUN
fcis-5200	23	3	consumption	consumption	NOUN
fcis-5200	23	4	prediction	prediction	NOUN
fcis-5200	23	5	of	of	ADP
fcis-5200	23	6	the	the	DET
fcis-5200	23	7	cnc	cnc	PROPN
fcis-5200	23	8	machining	machining	NOUN
fcis-5200	23	9	process	process	NOUN
fcis-5200	23	10	is	be	AUX
fcis-5200	23	11	modeled	model	VERB
fcis-5200	23	12	by	by	ADP
fcis-5200	23	13	the	the	DET
fcis-5200	23	14	energy	energy	NOUN
fcis-5200	23	15	modeling	modeling	NOUN
fcis-5200	23	16	framework	framework	NOUN
fcis-5200	23	17	based	base	VERB
fcis-5200	23	18	on	on	ADP
fcis-5200	23	19	incomplete	incomplete	ADJ
fcis-5200	23	20	data	datum	NOUN
fcis-5200	23	21	by	by	ADP
fcis-5200	23	22	jian	jian	PROPN
fcis-5200	23	23	pan	pan	PROPN
fcis-5200	23	24	et	et	PROPN
fcis-5200	23	25	al	al	PROPN
fcis-5200	24	1	[	[	X
fcis-5200	24	2	9	9	NUM
fcis-5200	24	3	]	]	PUNCT
fcis-5200	24	4	.	.	PUNCT
fcis-5200	25	1	for	for	SCONJ
fcis-5200	25	2	the	the	DET
fcis-5200	25	3	system	system	NOUN
fcis-5200	25	4	fault	fault	VERB
fcis-5200	25	5	diagnosis	diagnosis	NOUN
fcis-5200	25	6	and	and	CCONJ
fcis-5200	25	7	performance	performance	NOUN
fcis-5200	25	8	analysis	analysis	NOUN
fcis-5200	25	9	,	,	PUNCT
fcis-5200	25	10	a	a	DET
fcis-5200	25	11	fault	fault	NOUN
fcis-5200	25	12	tree	tree	NOUN
fcis-5200	25	13	analysis	analysis	NOUN
fcis-5200	25	14	method	method	NOUN
fcis-5200	25	15	is	be	AUX
fcis-5200	25	16	proposed	propose	VERB
fcis-5200	25	17	by	by	ADP
fcis-5200	25	18	sli	sli	NOUN
fcis-5200	25	19	et	et	PROPN
fcis-5200	25	20	al	al	PROPN
fcis-5200	25	21	.	.	PROPN
fcis-5200	25	22	eliminate	eliminate	VERB
fcis-5200	25	23	uncertainty	uncertainty	NOUN
fcis-5200	25	24	using	use	VERB
fcis-5200	25	25	expert	expert	ADJ
fcis-5200	25	26	opinion	opinion	NOUN
fcis-5200	25	27	,	,	PUNCT
fcis-5200	25	28	combining	combine	VERB
fcis-5200	25	29	field	field	NOUN
fcis-5200	25	30	data	datum	NOUN
fcis-5200	25	31	based	base	VERB
fcis-5200	25	32	on	on	ADP
fcis-5200	25	33	dempster	dempster	PROPN
fcis-5200	25	34	-	-	PUNCT
fcis-5200	25	35	shafer	shafer	PROPN
fcis-5200	25	36	theory	theory	NOUN
fcis-5200	25	37	and	and	CCONJ
fcis-5200	25	38	rough	rough	ADJ
fcis-5200	25	39	set	set	NOUN
fcis-5200	25	40	theory	theory	NOUN
fcis-5200	25	41	[	[	X
fcis-5200	25	42	10	10	NUM
fcis-5200	25	43	]	]	PUNCT
fcis-5200	25	44	.	.	PUNCT
fcis-5200	26	1	guo	guo	PROPN
fcis-5200	26	2	c	c	PROPN
fcis-5200	26	3	et	et	PROPN
fcis-5200	26	4	al	al	PROPN
fcis-5200	26	5	.	.	PROPN
fcis-5200	26	6	proposed	propose	VERB
fcis-5200	26	7	a	a	DET
fcis-5200	26	8	new	new	ADJ
fcis-5200	26	9	fdd	fdd	PROPN
fcis-5200	26	10	method	method	NOUN
fcis-5200	26	11	for	for	ADP
fcis-5200	26	12	process	process	NOUN
fcis-5200	26	13	fault	fault	NOUN
fcis-5200	26	14	identification	identification	NOUN
fcis-5200	26	15	based	base	VERB
fcis-5200	26	16	on	on	ADP
fcis-5200	26	17	incomplete	incomplete	ADJ
fcis-5200	26	18	data	datum	NOUN
fcis-5200	26	19	interpolation	interpolation	NOUN
fcis-5200	26	20	techniques	technique	NOUN
fcis-5200	26	21	,	,	PUNCT
fcis-5200	26	22	with	with	ADP
fcis-5200	26	23	an	an	DET
fcis-5200	26	24	improved	improve	VERB
fcis-5200	26	25	stacked	stack	VERB
fcis-5200	26	26	autoencoder	autoencoder	NOUN
fcis-5200	26	27	in	in	ADP
fcis-5200	26	28	the	the	DET
fcis-5200	26	29	incomplete	incomplete	ADJ
fcis-5200	26	30	data	datum	NOUN
fcis-5200	26	31	processing	processing	NOUN
fcis-5200	26	32	stage	stage	NOUN
fcis-5200	26	33	[	[	X
fcis-5200	26	34	11	11	NUM
fcis-5200	26	35	]	]	PUNCT
fcis-5200	26	36	.	.	PUNCT
fcis-5200	27	1	jiang	jiang	PROPN
fcis-5200	27	2	w	w	PROPN
fcis-5200	27	3	et	et	PROPN
fcis-5200	27	4	al	al	PROPN
fcis-5200	27	5	.	.	PROPN
fcis-5200	27	6	,	,	PUNCT
fcis-5200	27	7	carried	carry	VERB
fcis-5200	27	8	out	out	ADP
fcis-5200	27	9	a	a	DET
fcis-5200	27	10	research	research	NOUN
fcis-5200	27	11	on	on	ADP
fcis-5200	27	12	cnc	cnc	PROPN
fcis-5200	27	13	machine	machine	NOUN
fcis-5200	27	14	tool	tool	NOUN
fcis-5200	27	15	health	health	NOUN
fcis-5200	27	16	monitoring	monitoring	NOUN
fcis-5200	27	17	system	system	NOUN
fcis-5200	27	18	based	base	VERB
fcis-5200	27	19	on	on	ADP
fcis-5200	27	20	artificial	artificial	ADJ
fcis-5200	27	21	intelligence	intelligence	NOUN
fcis-5200	28	1	[	[	X
fcis-5200	28	2	12	12	NUM
fcis-5200	28	3	]	]	PUNCT
fcis-5200	28	4	.	.	PUNCT
fcis-5200	29	1	dzaferagic	dzaferagic	PROPN
fcis-5200	30	1	m	m	AUX
fcis-5200	30	2	et	et	PROPN
fcis-5200	30	3	al	al	PROPN
fcis-5200	30	4	.	.	PROPN
fcis-5200	30	5	discussed	discuss	VERB
fcis-5200	30	6	reliability	reliability	NOUN
fcis-5200	30	7	issues	issue	NOUN
fcis-5200	30	8	in	in	ADP
fcis-5200	30	9	the	the	DET
fcis-5200	30	10	industrial	industrial	ADJ
fcis-5200	30	11	internet	internet	NOUN
fcis-5200	30	12	of	of	ADP
fcis-5200	30	13	things	thing	NOUN
fcis-5200	30	14	(	(	PUNCT
fcis-5200	30	15	iiot	iiot	NOUN
fcis-5200	30	16	)	)	PUNCT
fcis-5200	30	17	by	by	ADP
fcis-5200	30	18	generating	generate	VERB
fcis-5200	30	19	models	model	NOUN
fcis-5200	30	20	to	to	PART
fcis-5200	30	21	support	support	VERB
fcis-5200	30	22	fault	fault	NOUN
fcis-5200	30	23	diagnosis	diagnosis	NOUN
fcis-5200	30	24	[	[	X
fcis-5200	30	25	13	13	NUM
fcis-5200	30	26	]	]	PUNCT
fcis-5200	30	27	.	.	PUNCT
fcis-5200	31	1	compared	compare	VERB
fcis-5200	31	2	with	with	ADP
fcis-5200	31	3	the	the	DET
fcis-5200	31	4	traditional	traditional	ADJ
fcis-5200	31	5	electroplating	electroplating	NOUN
fcis-5200	31	6	method	method	NOUN
fcis-5200	31	7	,	,	PUNCT
fcis-5200	31	8	vacuum	vacuum	NOUN
fcis-5200	31	9	coating	coating	NOUN
fcis-5200	31	10	technology	technology	NOUN
fcis-5200	31	11	has	have	VERB
fcis-5200	31	12	great	great	ADJ
fcis-5200	31	13	advantages	advantage	NOUN
fcis-5200	31	14	in	in	ADP
fcis-5200	31	15	cost	cost	NOUN
fcis-5200	31	16	,	,	PUNCT
fcis-5200	31	17	environmental	environmental	ADJ
fcis-5200	31	18	protection	protection	NOUN
fcis-5200	31	19	,	,	PUNCT
fcis-5200	31	20	product	product	NOUN
fcis-5200	31	21	quality	quality	NOUN
fcis-5200	31	22	,	,	PUNCT
fcis-5200	31	23	decorative	decorative	ADJ
fcis-5200	31	24	effect	effect	NOUN
fcis-5200	31	25	,	,	PUNCT
fcis-5200	31	26	energy	energy	NOUN
fcis-5200	31	27	consumption	consumption	NOUN
fcis-5200	31	28	and	and	CCONJ
fcis-5200	31	29	other	other	ADJ
fcis-5200	31	30	aspects	aspect	NOUN
fcis-5200	31	31	,	,	PUNCT
fcis-5200	31	32	vacuum	vacuum	NOUN
fcis-5200	31	33	coating	coating	NOUN
fcis-5200	31	34	technology	technology	NOUN
fcis-5200	31	35	and	and	CCONJ
fcis-5200	31	36	film	film	NOUN
fcis-5200	31	37	products	product	NOUN
fcis-5200	31	38	are	be	AUX
fcis-5200	31	39	widely	widely	ADV
fcis-5200	31	40	used	use	VERB
fcis-5200	31	41	in	in	ADP
fcis-5200	31	42	industry	industry	NOUN
fcis-5200	31	43	,	,	PUNCT
fcis-5200	31	44	especially	especially	ADV
fcis-5200	31	45	in	in	ADP
fcis-5200	31	46	the	the	DET
fcis-5200	31	47	field	field	NOUN
fcis-5200	31	48	of	of	ADP
fcis-5200	31	49	electronic	electronic	ADJ
fcis-5200	31	50	materials	material	NOUN
fcis-5200	31	51	and	and	CCONJ
fcis-5200	31	52	components	component	NOUN
fcis-5200	31	53	industry	industry	NOUN
fcis-5200	31	54	occupies	occupy	VERB
fcis-5200	31	55	an	an	DET
fcis-5200	31	56	extremely	extremely	ADV
fcis-5200	31	57	important	important	ADJ
fcis-5200	31	58	position	position	NOUN
fcis-5200	31	59	[	[	X
fcis-5200	31	60	14~16	14~16	NUM
fcis-5200	31	61	]	]	PUNCT
fcis-5200	31	62	.	.	PUNCT
fcis-5200	32	1	the	the	DET
fcis-5200	32	2	rapid	rapid	ADJ
fcis-5200	32	3	development	development	NOUN
fcis-5200	32	4	of	of	ADP
fcis-5200	32	5	surface	surface	NOUN
fcis-5200	32	6	and	and	CCONJ
fcis-5200	32	7	thin	thin	ADJ
fcis-5200	32	8	film	film	NOUN
fcis-5200	32	9	science	science	NOUN
fcis-5200	32	10	,	,	PUNCT
fcis-5200	32	11	microelectronics	microelectronic	NOUN
fcis-5200	32	12	and	and	CCONJ
fcis-5200	32	13	nanotechnology	nanotechnology	NOUN
fcis-5200	32	14	makes	make	VERB
fcis-5200	32	15	the	the	DET
fcis-5200	32	16	development	development	NOUN
fcis-5200	32	17	of	of	ADP
fcis-5200	32	18	coating	coat	VERB
fcis-5200	32	19	equipment	equipment	NOUN
fcis-5200	32	20	and	and	CCONJ
fcis-5200	32	21	the	the	DET
fcis-5200	32	22	research	research	NOUN
fcis-5200	32	23	of	of	ADP
fcis-5200	32	24	monitoring	monitor	VERB
fcis-5200	32	25	method	method	NOUN
fcis-5200	32	26	system	system	NOUN
fcis-5200	32	27	become	become	VERB
fcis-5200	32	28	the	the	DET
fcis-5200	32	29	focus	focus	NOUN
fcis-5200	32	30	of	of	ADP
fcis-5200	32	31	coating	coat	VERB
fcis-5200	32	32	technology	technology	NOUN
fcis-5200	33	1	[	[	X
fcis-5200	33	2	17~19	17~19	NUM
fcis-5200	33	3	]	]	PUNCT
fcis-5200	33	4	.	.	PUNCT
fcis-5200	34	1	high	high	ADJ
fcis-5200	34	2	performance	performance	NOUN
fcis-5200	34	3	coating	coating	NOUN
fcis-5200	34	4	technology	technology	NOUN
fcis-5200	34	5	requires	require	VERB
fcis-5200	34	6	real	real	ADJ
fcis-5200	34	7	-	-	PUNCT
fcis-5200	34	8	time	time	NOUN
fcis-5200	34	9	monitoring	monitoring	NOUN
fcis-5200	34	10	of	of	ADP
fcis-5200	34	11	equipment	equipment	NOUN
fcis-5200	34	12	temperature	temperature	NOUN
fcis-5200	34	13	,	,	PUNCT
fcis-5200	34	14	vacuum	vacuum	NOUN
fcis-5200	34	15	,	,	PUNCT
fcis-5200	34	16	speed	speed	NOUN
fcis-5200	34	17	,	,	PUNCT
fcis-5200	34	18	target	target	NOUN
fcis-5200	34	19	,	,	PUNCT
fcis-5200	34	20	5	5	NUM
fcis-5200	34	21	film	film	NOUN
fcis-5200	34	22	thickness	thickness	NOUN
fcis-5200	34	23	,	,	PUNCT
fcis-5200	34	24	surface	surface	NOUN
fcis-5200	34	25	conditions	condition	NOUN
fcis-5200	34	26	,	,	PUNCT
fcis-5200	34	27	and	and	CCONJ
fcis-5200	34	28	feedback	feedback	NOUN
fcis-5200	34	29	control	control	NOUN
fcis-5200	34	30	.	.	PUNCT
fcis-5200	35	1	at	at	ADP
fcis-5200	35	2	present	present	ADJ
fcis-5200	35	3	,	,	PUNCT
fcis-5200	35	4	most	most	ADJ
fcis-5200	35	5	of	of	ADP
fcis-5200	35	6	the	the	DET
fcis-5200	35	7	coating	coating	NOUN
fcis-5200	35	8	production	production	NOUN
fcis-5200	35	9	still	still	ADV
fcis-5200	35	10	adopts	adopt	VERB
fcis-5200	35	11	relatively	relatively	ADV
fcis-5200	35	12	backward	backward	ADJ
fcis-5200	35	13	traditional	traditional	ADJ
fcis-5200	35	14	methods	method	NOUN
fcis-5200	35	15	,	,	PUNCT
fcis-5200	35	16	equipment	equipment	NOUN
fcis-5200	35	17	information	information	NOUN
fcis-5200	35	18	,	,	PUNCT
fcis-5200	35	19	operation	operation	NOUN
fcis-5200	35	20	data	datum	NOUN
fcis-5200	35	21	,	,	PUNCT
fcis-5200	35	22	production	production	NOUN
fcis-5200	35	23	information	information	NOUN
fcis-5200	35	24	,	,	PUNCT
fcis-5200	35	25	maintenance	maintenance	NOUN
fcis-5200	35	26	information	information	NOUN
fcis-5200	35	27	,	,	PUNCT
fcis-5200	35	28	maintenance	maintenance	NOUN
fcis-5200	35	29	information	information	NOUN
fcis-5200	35	30	and	and	CCONJ
fcis-5200	35	31	other	other	ADJ
fcis-5200	35	32	information	information	NOUN
fcis-5200	35	33	of	of	ADP
fcis-5200	35	34	the	the	DET
fcis-5200	35	35	digital	digital	ADJ
fcis-5200	35	36	technology	technology	NOUN
fcis-5200	35	37	application	application	NOUN
fcis-5200	35	38	is	be	AUX
fcis-5200	35	39	less	less	ADJ
fcis-5200	35	40	,	,	PUNCT
fcis-5200	35	41	its	its	PRON
fcis-5200	35	42	information	information	NOUN
fcis-5200	35	43	,	,	PUNCT
fcis-5200	35	44	digital	digital	ADJ
fcis-5200	35	45	and	and	CCONJ
fcis-5200	35	46	intelligent	intelligent	ADJ
fcis-5200	35	47	level	level	NOUN
fcis-5200	35	48	is	be	AUX
fcis-5200	35	49	relatively	relatively	ADV
fcis-5200	35	50	backward	backward	ADJ
fcis-5200	35	51	.	.	PUNCT
fcis-5200	36	1	therefore	therefore	ADV
fcis-5200	36	2	,	,	PUNCT
fcis-5200	36	3	by	by	ADP
fcis-5200	36	4	applying	apply	VERB
fcis-5200	36	5	the	the	DET
fcis-5200	36	6	internet	internet	NOUN
fcis-5200	36	7	of	of	ADP
fcis-5200	36	8	things	thing	NOUN
fcis-5200	36	9	technology	technology	NOUN
fcis-5200	36	10	to	to	ADP
fcis-5200	36	11	every	every	DET
fcis-5200	36	12	link	link	NOUN
fcis-5200	36	13	of	of	ADP
fcis-5200	36	14	coating	coating	NOUN
fcis-5200	36	15	production	production	NOUN
fcis-5200	36	16	,	,	PUNCT
fcis-5200	36	17	this	this	DET
fcis-5200	36	18	paper	paper	NOUN
fcis-5200	36	19	realizes	realize	VERB
fcis-5200	36	20	the	the	DET
fcis-5200	36	21	digital	digital	ADJ
fcis-5200	36	22	and	and	CCONJ
fcis-5200	36	23	intelligent	intelligent	ADJ
fcis-5200	36	24	production	production	NOUN
fcis-5200	36	25	of	of	ADP
fcis-5200	36	26	coating	coating	NOUN
fcis-5200	36	27	technology	technology	NOUN
fcis-5200	36	28	.	.	PUNCT
fcis-5200	37	1	2	2	X
fcis-5200	37	2	.	.	X
fcis-5200	37	3	research	research	NOUN
fcis-5200	37	4	contents	content	NOUN
fcis-5200	37	5	in	in	ADP
fcis-5200	37	6	view	view	NOUN
fcis-5200	37	7	of	of	ADP
fcis-5200	37	8	the	the	DET
fcis-5200	37	9	relatively	relatively	ADV
fcis-5200	37	10	backward	backward	ADJ
fcis-5200	37	11	informatization	informatization	NOUN
fcis-5200	37	12	,	,	PUNCT
fcis-5200	37	13	digitalization	digitalization	NOUN
fcis-5200	37	14	and	and	CCONJ
fcis-5200	37	15	intelligence	intelligence	NOUN
fcis-5200	37	16	level	level	NOUN
fcis-5200	37	17	of	of	ADP
fcis-5200	37	18	coating	coating	NOUN
fcis-5200	37	19	process	process	NOUN
fcis-5200	37	20	equipment	equipment	NOUN
fcis-5200	37	21	,	,	PUNCT
fcis-5200	37	22	this	this	DET
fcis-5200	37	23	project	project	NOUN
fcis-5200	37	24	focuses	focus	VERB
fcis-5200	37	25	on	on	ADP
fcis-5200	37	26	the	the	DET
fcis-5200	37	27	problems	problem	NOUN
fcis-5200	37	28	related	relate	VERB
fcis-5200	37	29	to	to	ADP
fcis-5200	37	30	the	the	DET
fcis-5200	37	31	digital	digital	ADJ
fcis-5200	37	32	application	application	NOUN
fcis-5200	37	33	of	of	ADP
fcis-5200	37	34	internet	internet	NOUN
fcis-5200	37	35	of	of	ADP
fcis-5200	37	36	things	thing	NOUN
fcis-5200	37	37	technology	technology	NOUN
fcis-5200	37	38	in	in	ADP
fcis-5200	37	39	coating	coat	VERB
fcis-5200	37	40	(	(	PUNCT
fcis-5200	37	41	coating	coating	NOUN
fcis-5200	37	42	)	)	PUNCT
fcis-5200	37	43	production	production	NOUN
fcis-5200	37	44	,	,	PUNCT
fcis-5200	37	45	and	and	CCONJ
fcis-5200	37	46	puts	put	VERB
fcis-5200	37	47	forward	forward	ADV
fcis-5200	37	48	the	the	DET
fcis-5200	37	49	construction	construction	NOUN
fcis-5200	37	50	and	and	CCONJ
fcis-5200	37	51	implementation	implementation	NOUN
fcis-5200	37	52	plan	plan	NOUN
fcis-5200	37	53	of	of	ADP
fcis-5200	37	54	the	the	DET
fcis-5200	37	55	operation	operation	NOUN
fcis-5200	37	56	and	and	CCONJ
fcis-5200	37	57	maintenance	maintenance	NOUN
fcis-5200	37	58	management	management	NOUN
fcis-5200	37	59	and	and	CCONJ
fcis-5200	37	60	monitoring	monitoring	NOUN
fcis-5200	37	61	system	system	NOUN
fcis-5200	37	62	of	of	ADP
fcis-5200	37	63	coating	coating	NOUN
fcis-5200	37	64	(	(	PUNCT
fcis-5200	37	65	coating	coating	NOUN
fcis-5200	37	66	)	)	PUNCT
fcis-5200	37	67	equipment	equipment	NOUN
fcis-5200	37	68	.	.	PUNCT
fcis-5200	38	1	through	through	ADP
fcis-5200	38	2	the	the	DET
fcis-5200	38	3	internet	internet	NOUN
fcis-5200	38	4	of	of	ADP
fcis-5200	38	5	things	thing	NOUN
fcis-5200	38	6	technology	technology	NOUN
fcis-5200	38	7	,	,	PUNCT
fcis-5200	38	8	the	the	DET
fcis-5200	38	9	production	production	NOUN
fcis-5200	38	10	and	and	CCONJ
fcis-5200	38	11	manufacturing	manufacturing	NOUN
fcis-5200	38	12	system	system	NOUN
fcis-5200	38	13	for	for	ADP
fcis-5200	38	14	coating	coat	VERB
fcis-5200	38	15	(	(	PUNCT
fcis-5200	38	16	coating	coating	NOUN
fcis-5200	38	17	)	)	PUNCT
fcis-5200	38	18	equipment	equipment	NOUN
fcis-5200	38	19	is	be	AUX
fcis-5200	38	20	developed	develop	VERB
fcis-5200	38	21	to	to	PART
fcis-5200	38	22	realize	realize	VERB
fcis-5200	38	23	the	the	DET
fcis-5200	38	24	man	man	NOUN
fcis-5200	38	25	-	-	PUNCT
fcis-5200	38	26	machine	machine	NOUN
fcis-5200	38	27	thing	thing	NOUN
fcis-5200	38	28	connection	connection	NOUN
fcis-5200	38	29	,	,	PUNCT
fcis-5200	38	30	connect	connect	VERB
fcis-5200	38	31	the	the	DET
fcis-5200	38	32	equipment	equipment	NOUN
fcis-5200	38	33	with	with	ADP
fcis-5200	38	34	the	the	DET
fcis-5200	38	35	production	production	NOUN
fcis-5200	38	36	process	process	NOUN
fcis-5200	38	37	in	in	ADP
fcis-5200	38	38	real	real	ADJ
fcis-5200	38	39	time	time	NOUN
fcis-5200	38	40	,	,	PUNCT
fcis-5200	38	41	save	save	VERB
fcis-5200	38	42	and	and	CCONJ
fcis-5200	38	43	analyze	analyze	VERB
fcis-5200	38	44	the	the	DET
fcis-5200	38	45	production	production	NOUN
fcis-5200	38	46	process	process	NOUN
fcis-5200	38	47	data	datum	NOUN
fcis-5200	38	48	,	,	PUNCT
fcis-5200	38	49	and	and	CCONJ
fcis-5200	38	50	the	the	DET
fcis-5200	38	51	abnormal	abnormal	ADJ
fcis-5200	38	52	state	state	NOUN
fcis-5200	38	53	of	of	ADP
fcis-5200	38	54	the	the	DET
fcis-5200	38	55	production	production	NOUN
fcis-5200	38	56	equipment	equipment	NOUN
fcis-5200	38	57	can	can	AUX
fcis-5200	38	58	be	be	AUX
fcis-5200	38	59	found	find	VERB
fcis-5200	38	60	and	and	CCONJ
fcis-5200	38	61	treated	treat	VERB
fcis-5200	38	62	in	in	ADP
fcis-5200	38	63	time	time	NOUN
fcis-5200	38	64	,	,	PUNCT
fcis-5200	38	65	and	and	CCONJ
fcis-5200	38	66	achieve	achieve	VERB
fcis-5200	38	67	the	the	DET
fcis-5200	38	68	improvement	improvement	NOUN
fcis-5200	38	69	of	of	ADP
fcis-5200	38	70	production	production	NOUN
fcis-5200	38	71	efficiency	efficiency	NOUN
fcis-5200	38	72	and	and	CCONJ
fcis-5200	38	73	safety	safety	NOUN
fcis-5200	38	74	.	.	PUNCT
fcis-5200	39	1	the	the	DET
fcis-5200	39	2	scheme	scheme	NOUN
fcis-5200	39	3	focuses	focus	VERB
fcis-5200	39	4	on	on	ADP
fcis-5200	39	5	the	the	DET
fcis-5200	39	6	study	study	NOUN
fcis-5200	39	7	of	of	ADP
fcis-5200	39	8	data	data	PROPN
fcis-5200	39	9	acquisition	acquisition	NOUN
fcis-5200	39	10	,	,	PUNCT
fcis-5200	39	11	network	network	NOUN
fcis-5200	39	12	communication	communication	NOUN
fcis-5200	39	13	and	and	CCONJ
fcis-5200	39	14	data	datum	NOUN
fcis-5200	39	15	processing	processing	NOUN
fcis-5200	39	16	and	and	CCONJ
fcis-5200	39	17	other	other	ADJ
fcis-5200	39	18	technical	technical	ADJ
fcis-5200	39	19	problems	problem	NOUN
fcis-5200	39	20	of	of	ADP
fcis-5200	39	21	coating	coating	NOUN
fcis-5200	39	22	(	(	PUNCT
fcis-5200	39	23	coating	coating	NOUN
fcis-5200	39	24	)	)	PUNCT
fcis-5200	39	25	equipment	equipment	NOUN
fcis-5200	39	26	,	,	PUNCT
fcis-5200	39	27	through	through	ADP
fcis-5200	39	28	the	the	DET
fcis-5200	39	29	comprehensive	comprehensive	ADJ
fcis-5200	39	30	application	application	NOUN
fcis-5200	39	31	of	of	ADP
fcis-5200	39	32	these	these	DET
fcis-5200	39	33	technologies	technology	NOUN
fcis-5200	39	34	,	,	PUNCT
fcis-5200	39	35	and	and	CCONJ
fcis-5200	39	36	finally	finally	ADV
fcis-5200	39	37	realize	realize	VERB
fcis-5200	39	38	the	the	DET
fcis-5200	39	39	digitalization	digitalization	NOUN
fcis-5200	39	40	,	,	PUNCT
fcis-5200	39	41	information	information	NOUN
fcis-5200	39	42	and	and	CCONJ
fcis-5200	39	43	intelligence	intelligence	NOUN
fcis-5200	39	44	of	of	ADP
fcis-5200	39	45	coating	coating	NOUN
fcis-5200	39	46	production	production	NOUN
fcis-5200	39	47	.	.	PUNCT
fcis-5200	40	1	2.1	2.1	NUM
fcis-5200	40	2	.	.	PUNCT
fcis-5200	40	3	data	data	NOUN
fcis-5200	40	4	collector	collector	NOUN
fcis-5200	40	5	module	module	NOUN
fcis-5200	40	6	the	the	DET
fcis-5200	40	7	data	data	NOUN
fcis-5200	40	8	information	information	NOUN
fcis-5200	40	9	in	in	ADP
fcis-5200	40	10	the	the	DET
fcis-5200	40	11	internet	internet	NOUN
fcis-5200	40	12	of	of	ADP
fcis-5200	40	13	things	thing	NOUN
fcis-5200	40	14	system	system	NOUN
fcis-5200	40	15	comes	come	VERB
fcis-5200	40	16	from	from	ADP
fcis-5200	40	17	the	the	DET
fcis-5200	40	18	terminal	terminal	ADJ
fcis-5200	40	19	equipment	equipment	NOUN
fcis-5200	40	20	,	,	PUNCT
fcis-5200	40	21	which	which	PRON
fcis-5200	40	22	can	can	AUX
fcis-5200	40	23	sense	sense	VERB
fcis-5200	40	24	the	the	DET
fcis-5200	40	25	surrounding	surround	VERB
fcis-5200	40	26	environment	environment	NOUN
fcis-5200	40	27	through	through	ADP
fcis-5200	40	28	various	various	ADJ
fcis-5200	40	29	sensors	sensor	NOUN
fcis-5200	40	30	.	.	PUNCT
fcis-5200	41	1	and	and	CCONJ
fcis-5200	41	2	it	it	PRON
fcis-5200	41	3	is	be	AUX
fcis-5200	41	4	more	more	ADV
fcis-5200	41	5	accurate	accurate	ADJ
fcis-5200	41	6	and	and	CCONJ
fcis-5200	41	7	wider	wide	ADJ
fcis-5200	41	8	than	than	ADP
fcis-5200	41	9	human	human	ADJ
fcis-5200	41	10	perception	perception	NOUN
fcis-5200	41	11	.	.	PUNCT
fcis-5200	42	1	sensor	sensor	NOUN
fcis-5200	42	2	technology	technology	NOUN
fcis-5200	42	3	as	as	ADP
fcis-5200	42	4	one	one	NUM
fcis-5200	42	5	of	of	ADP
fcis-5200	42	6	the	the	DET
fcis-5200	42	7	key	key	ADJ
fcis-5200	42	8	technologies	technology	NOUN
fcis-5200	42	9	in	in	ADP
fcis-5200	42	10	the	the	DET
fcis-5200	42	11	internet	internet	NOUN
fcis-5200	42	12	of	of	ADP
fcis-5200	42	13	things	thing	NOUN
fcis-5200	42	14	system	system	NOUN
fcis-5200	42	15	,	,	PUNCT
fcis-5200	42	16	how	how	SCONJ
fcis-5200	42	17	to	to	PART
fcis-5200	42	18	build	build	VERB
fcis-5200	42	19	a	a	DET
fcis-5200	42	20	suitable	suitable	ADJ
fcis-5200	42	21	sensor	sensor	NOUN
fcis-5200	42	22	network	network	NOUN
fcis-5200	42	23	to	to	PART
fcis-5200	42	24	collect	collect	VERB
fcis-5200	42	25	the	the	DET
fcis-5200	42	26	information	information	NOUN
fcis-5200	42	27	of	of	ADP
fcis-5200	42	28	the	the	DET
fcis-5200	42	29	coating	coating	NOUN
fcis-5200	42	30	(	(	PUNCT
fcis-5200	42	31	coating	coating	NOUN
fcis-5200	42	32	)	)	PUNCT
fcis-5200	42	33	equipment	equipment	NOUN
fcis-5200	42	34	will	will	AUX
fcis-5200	42	35	be	be	AUX
fcis-5200	42	36	the	the	DET
fcis-5200	42	37	focus	focus	NOUN
fcis-5200	42	38	of	of	ADP
fcis-5200	42	39	the	the	DET
fcis-5200	42	40	research	research	NOUN
fcis-5200	42	41	.	.	PUNCT
fcis-5200	43	1	common	common	ADJ
fcis-5200	43	2	data	data	NOUN
fcis-5200	43	3	acquisition	acquisition	NOUN
fcis-5200	43	4	technologies	technology	NOUN
fcis-5200	43	5	include	include	VERB
fcis-5200	43	6	plc	plc	PROPN
fcis-5200	43	7	communication	communication	NOUN
fcis-5200	43	8	port	port	NOUN
fcis-5200	43	9	data	datum	NOUN
fcis-5200	43	10	acquisition	acquisition	NOUN
fcis-5200	43	11	and	and	CCONJ
fcis-5200	43	12	standard	standard	ADJ
fcis-5200	43	13	electrical	electrical	ADJ
fcis-5200	43	14	signal	signal	NOUN
fcis-5200	43	15	acquisition	acquisition	NOUN
fcis-5200	43	16	.	.	PUNCT
fcis-5200	44	1	in	in	ADP
fcis-5200	44	2	addition	addition	NOUN
fcis-5200	44	3	,	,	PUNCT
fcis-5200	44	4	the	the	DET
fcis-5200	44	5	equipment	equipment	NOUN
fcis-5200	44	6	display	display	NOUN
fcis-5200	44	7	screen	screen	NOUN
fcis-5200	44	8	signal	signal	NOUN
fcis-5200	44	9	analysis	analysis	NOUN
fcis-5200	44	10	can	can	AUX
fcis-5200	44	11	also	also	ADV
fcis-5200	44	12	conduct	conduct	VERB
fcis-5200	44	13	data	datum	NOUN
fcis-5200	44	14	acquisition	acquisition	NOUN
fcis-5200	44	15	.	.	PUNCT
fcis-5200	45	1	combined	combine	VERB
fcis-5200	45	2	with	with	ADP
fcis-5200	45	3	the	the	DET
fcis-5200	45	4	above	above	ADJ
fcis-5200	45	5	three	three	NUM
fcis-5200	45	6	data	datum	NOUN
fcis-5200	45	7	acquisition	acquisition	NOUN
fcis-5200	45	8	schemes	scheme	NOUN
fcis-5200	45	9	,	,	PUNCT
fcis-5200	45	10	a	a	DET
fcis-5200	45	11	suitable	suitable	ADJ
fcis-5200	45	12	data	data	NOUN
fcis-5200	45	13	acquisition	acquisition	NOUN
fcis-5200	45	14	module	module	NOUN
fcis-5200	45	15	is	be	AUX
fcis-5200	45	16	developed	develop	VERB
fcis-5200	45	17	to	to	PART
fcis-5200	45	18	collect	collect	VERB
fcis-5200	45	19	the	the	DET
fcis-5200	45	20	process	process	NOUN
fcis-5200	45	21	data	datum	NOUN
fcis-5200	45	22	of	of	ADP
fcis-5200	45	23	the	the	DET
fcis-5200	45	24	coating	coating	NOUN
fcis-5200	45	25	(	(	PUNCT
fcis-5200	45	26	coating	coating	NOUN
fcis-5200	45	27	)	)	PUNCT
fcis-5200	45	28	production	production	NOUN
fcis-5200	45	29	equipment	equipment	NOUN
fcis-5200	45	30	.	.	PUNCT
fcis-5200	46	1	in	in	ADP
fcis-5200	46	2	coating	coat	VERB
fcis-5200	46	3	(	(	PUNCT
fcis-5200	46	4	coating	coating	NOUN
fcis-5200	46	5	)	)	PUNCT
fcis-5200	46	6	equipment	equipment	NOUN
fcis-5200	46	7	,	,	PUNCT
fcis-5200	46	8	with	with	ADP
fcis-5200	46	9	signal	signal	NOUN
fcis-5200	46	10	,	,	PUNCT
fcis-5200	46	11	data	datum	NOUN
fcis-5200	46	12	technology	technology	NOUN
fcis-5200	46	13	to	to	PART
fcis-5200	46	14	produce	produce	VERB
fcis-5200	46	15	equipment	equipment	NOUN
fcis-5200	46	16	data	datum	NOUN
fcis-5200	46	17	acquisition	acquisition	NOUN
fcis-5200	46	18	,	,	PUNCT
fcis-5200	46	19	the	the	DET
fcis-5200	46	20	operation	operation	NOUN
fcis-5200	46	21	of	of	ADP
fcis-5200	46	22	energy	energy	NOUN
fcis-5200	46	23	and	and	CCONJ
fcis-5200	46	24	raw	raw	ADJ
fcis-5200	46	25	materials	material	NOUN
fcis-5200	46	26	consumption	consumption	NOUN
fcis-5200	46	27	,	,	PUNCT
fcis-5200	46	28	into	into	ADP
fcis-5200	46	29	the	the	DET
fcis-5200	46	30	library	library	NOUN
fcis-5200	46	31	for	for	ADP
fcis-5200	46	32	real	real	ADJ
fcis-5200	46	33	-	-	PUNCT
fcis-5200	46	34	time	time	NOUN
fcis-5200	46	35	monitoring	monitoring	NOUN
fcis-5200	46	36	,	,	PUNCT
fcis-5200	46	37	strictly	strictly	ADV
fcis-5200	46	38	control	control	VERB
fcis-5200	46	39	the	the	DET
fcis-5200	46	40	quality	quality	NOUN
fcis-5200	46	41	of	of	ADP
fcis-5200	46	42	products	product	NOUN
fcis-5200	46	43	,	,	PUNCT
fcis-5200	46	44	improve	improve	VERB
fcis-5200	46	45	the	the	DET
fcis-5200	46	46	automation	automation	NOUN
fcis-5200	46	47	of	of	ADP
fcis-5200	46	48	production	production	NOUN
fcis-5200	46	49	process	process	NOUN
fcis-5200	46	50	,	,	PUNCT
fcis-5200	46	51	improve	improve	VERB
fcis-5200	46	52	production	production	NOUN
fcis-5200	46	53	efficiency	efficiency	NOUN
fcis-5200	46	54	and	and	CCONJ
fcis-5200	46	55	promote	promote	VERB
fcis-5200	46	56	product	product	NOUN
fcis-5200	46	57	quality	quality	NOUN
fcis-5200	46	58	,	,	PUNCT
fcis-5200	46	59	promote	promote	VERB
fcis-5200	46	60	the	the	DET
fcis-5200	46	61	improvement	improvement	NOUN
fcis-5200	46	62	of	of	ADP
fcis-5200	46	63	automation	automation	NOUN
fcis-5200	46	64	level	level	NOUN
fcis-5200	46	65	and	and	CCONJ
fcis-5200	46	66	core	core	NOUN
fcis-5200	46	67	competitiveness	competitiveness	NOUN
fcis-5200	46	68	.	.	PUNCT
fcis-5200	47	1	the	the	DET
fcis-5200	47	2	combination	combination	NOUN
fcis-5200	47	3	of	of	ADP
fcis-5200	47	4	intelligent	intelligent	ADJ
fcis-5200	47	5	sensing	sense	VERB
fcis-5200	47	6	internet	internet	NOUN
fcis-5200	47	7	of	of	ADP
fcis-5200	47	8	things	thing	NOUN
fcis-5200	47	9	technology	technology	NOUN
fcis-5200	47	10	and	and	CCONJ
fcis-5200	47	11	coating	coating	NOUN
fcis-5200	47	12	(	(	PUNCT
fcis-5200	47	13	coating	coating	NOUN
fcis-5200	47	14	)	)	PUNCT
fcis-5200	47	15	technology	technology	NOUN
fcis-5200	47	16	can	can	AUX
fcis-5200	47	17	also	also	ADV
fcis-5200	47	18	greatly	greatly	ADV
fcis-5200	47	19	improve	improve	VERB
fcis-5200	47	20	the	the	DET
fcis-5200	47	21	safety	safety	NOUN
fcis-5200	47	22	factor	factor	NOUN
fcis-5200	47	23	of	of	ADP
fcis-5200	47	24	coating	coating	NOUN
fcis-5200	47	25	(	(	PUNCT
fcis-5200	47	26	coating	coating	NOUN
fcis-5200	47	27	)	)	PUNCT
fcis-5200	47	28	production	production	NOUN
fcis-5200	47	29	and	and	CCONJ
fcis-5200	47	30	reduce	reduce	VERB
fcis-5200	47	31	operation	operation	NOUN
fcis-5200	47	32	accidents	accident	NOUN
fcis-5200	47	33	.	.	PUNCT
fcis-5200	48	1	the	the	DET
fcis-5200	48	2	data	data	NOUN
fcis-5200	48	3	collector	collector	NOUN
fcis-5200	48	4	includes	include	VERB
fcis-5200	48	5	the	the	DET
fcis-5200	48	6	following	follow	VERB
fcis-5200	48	7	functions	function	NOUN
fcis-5200	48	8	.	.	PUNCT
fcis-5200	49	1	(	(	PUNCT
fcis-5200	49	2	1	1	X
fcis-5200	49	3	)	)	PUNCT
fcis-5200	49	4	data	datum	NOUN
fcis-5200	49	5	collection	collection	NOUN
fcis-5200	49	6	:	:	PUNCT
fcis-5200	49	7	use	use	VERB
fcis-5200	49	8	all	all	DET
fcis-5200	49	9	kinds	kind	NOUN
fcis-5200	49	10	of	of	ADP
fcis-5200	49	11	sensors	sensor	NOUN
fcis-5200	49	12	to	to	PART
fcis-5200	49	13	collect	collect	VERB
fcis-5200	49	14	the	the	DET
fcis-5200	49	15	operating	operate	VERB
fcis-5200	49	16	status	status	NOUN
fcis-5200	49	17	of	of	ADP
fcis-5200	49	18	coating	coating	NOUN
fcis-5200	49	19	equipment	equipment	NOUN
fcis-5200	49	20	,	,	PUNCT
fcis-5200	49	21	air	air	NOUN
fcis-5200	49	22	valve	valve	NOUN
fcis-5200	49	23	switch	switch	NOUN
fcis-5200	49	24	status	status	NOUN
fcis-5200	49	25	,	,	PUNCT
fcis-5200	49	26	operation	operation	NOUN
fcis-5200	49	27	time	time	NOUN
fcis-5200	49	28	,	,	PUNCT
fcis-5200	49	29	voltage	voltage	NOUN
fcis-5200	49	30	,	,	PUNCT
fcis-5200	49	31	current	current	ADJ
fcis-5200	49	32	,	,	PUNCT
fcis-5200	49	33	power	power	NOUN
fcis-5200	49	34	,	,	PUNCT
fcis-5200	49	35	temperature	temperature	NOUN
fcis-5200	49	36	,	,	PUNCT
fcis-5200	49	37	pressure	pressure	NOUN
fcis-5200	49	38	,	,	PUNCT
fcis-5200	49	39	vacuum	vacuum	NOUN
fcis-5200	49	40	degree	degree	NOUN
fcis-5200	49	41	,	,	PUNCT
fcis-5200	49	42	target	target	NOUN
fcis-5200	49	43	quantity	quantity	NOUN
fcis-5200	49	44	,	,	PUNCT
fcis-5200	49	45	the	the	DET
fcis-5200	49	46	distance	distance	NOUN
fcis-5200	49	47	between	between	ADP
fcis-5200	49	48	the	the	DET
fcis-5200	49	49	target	target	NOUN
fcis-5200	49	50	and	and	CCONJ
fcis-5200	49	51	the	the	DET
fcis-5200	49	52	arc	arc	NOUN
fcis-5200	49	53	needle	needle	NOUN
fcis-5200	49	54	(	(	PUNCT
fcis-5200	49	55	specific	specific	ADJ
fcis-5200	49	56	parameters	parameter	NOUN
fcis-5200	49	57	shall	shall	AUX
fcis-5200	49	58	be	be	AUX
fcis-5200	49	59	provided	provide	VERB
fcis-5200	49	60	by	by	ADP
fcis-5200	49	61	the	the	DET
fcis-5200	49	62	manufacturer	manufacturer	NOUN
fcis-5200	49	63	)	)	PUNCT
fcis-5200	49	64	.	.	PUNCT
fcis-5200	50	1	(	(	PUNCT
fcis-5200	50	2	2	2	X
fcis-5200	50	3	)	)	PUNCT
fcis-5200	50	4	edge	edge	NOUN
fcis-5200	50	5	calculation	calculation	NOUN
fcis-5200	50	6	:	:	PUNCT
fcis-5200	50	7	summarize	summarize	VERB
fcis-5200	50	8	,	,	PUNCT
fcis-5200	50	9	encapsulate	encapsulate	VERB
fcis-5200	50	10	,	,	PUNCT
fcis-5200	50	11	integrate	integrate	VERB
fcis-5200	50	12	,	,	PUNCT
fcis-5200	50	13	calculate	calculate	NOUN
fcis-5200	50	14	and	and	CCONJ
fcis-5200	50	15	store	store	VERB
fcis-5200	50	16	the	the	DET
fcis-5200	50	17	information	information	NOUN
fcis-5200	50	18	of	of	ADP
fcis-5200	50	19	the	the	DET
fcis-5200	50	20	equipment	equipment	NOUN
fcis-5200	50	21	.	.	PUNCT
fcis-5200	51	1	energy	energy	NOUN
fcis-5200	51	2	consumption	consumption	NOUN
fcis-5200	51	3	,	,	PUNCT
fcis-5200	51	4	running	running	NOUN
fcis-5200	51	5	time	time	NOUN
fcis-5200	51	6	,	,	PUNCT
fcis-5200	51	7	output	output	NOUN
fcis-5200	51	8	and	and	CCONJ
fcis-5200	51	9	other	other	ADJ
fcis-5200	51	10	data	datum	NOUN
fcis-5200	51	11	of	of	ADP
fcis-5200	51	12	the	the	DET
fcis-5200	51	13	equipment	equipment	NOUN
fcis-5200	51	14	.	.	PUNCT
fcis-5200	52	1	(	(	PUNCT
fcis-5200	52	2	3	3	X
fcis-5200	52	3	)	)	PUNCT
fcis-5200	52	4	intelligent	intelligent	ADJ
fcis-5200	52	5	diagnosis	diagnosis	NOUN
fcis-5200	52	6	:	:	PUNCT
fcis-5200	52	7	through	through	ADP
fcis-5200	52	8	intelligent	intelligent	ADJ
fcis-5200	52	9	comparative	comparative	ADJ
fcis-5200	52	10	analysis	analysis	NOUN
fcis-5200	52	11	of	of	ADP
fcis-5200	52	12	historical	historical	ADJ
fcis-5200	52	13	data	datum	NOUN
fcis-5200	52	14	and	and	CCONJ
fcis-5200	52	15	early	early	ADJ
fcis-5200	52	16	warning	warning	NOUN
fcis-5200	52	17	parameters	parameter	NOUN
fcis-5200	52	18	,	,	PUNCT
fcis-5200	52	19	diagnosis	diagnosis	NOUN
fcis-5200	52	20	of	of	ADP
fcis-5200	52	21	equipment	equipment	NOUN
fcis-5200	52	22	operation	operation	NOUN
fcis-5200	52	23	status	status	NOUN
fcis-5200	52	24	and	and	CCONJ
fcis-5200	52	25	health	health	NOUN
fcis-5200	52	26	quality	quality	NOUN
fcis-5200	52	27	analysis	analysis	NOUN
fcis-5200	52	28	and	and	CCONJ
fcis-5200	52	29	early	early	ADJ
fcis-5200	52	30	warning	warning	NOUN
fcis-5200	52	31	.	.	PUNCT
fcis-5200	53	1	2.2	2.2	NUM
fcis-5200	53	2	.	.	PUNCT
fcis-5200	54	1	network	network	NOUN
fcis-5200	54	2	communication	communication	NOUN
fcis-5200	54	3	module	module	NOUN
fcis-5200	54	4	transmission	transmission	NOUN
fcis-5200	54	5	network	network	NOUN
fcis-5200	54	6	is	be	AUX
fcis-5200	54	7	the	the	DET
fcis-5200	54	8	data	data	NOUN
fcis-5200	54	9	transmission	transmission	NOUN
fcis-5200	54	10	channel	channel	NOUN
fcis-5200	54	11	of	of	ADP
fcis-5200	54	12	the	the	DET
fcis-5200	54	13	internet	internet	NOUN
fcis-5200	54	14	of	of	ADP
fcis-5200	54	15	things	thing	NOUN
fcis-5200	54	16	.	.	PUNCT
fcis-5200	55	1	through	through	ADP
fcis-5200	55	2	the	the	DET
fcis-5200	55	3	wired	wire	VERB
fcis-5200	55	4	and	and	CCONJ
fcis-5200	55	5	wireless	wireless	ADJ
fcis-5200	55	6	data	datum	NOUN
fcis-5200	55	7	links	link	NOUN
fcis-5200	55	8	,	,	PUNCT
fcis-5200	55	9	the	the	DET
fcis-5200	55	10	data	datum	NOUN
fcis-5200	55	11	detected	detect	VERB
fcis-5200	55	12	by	by	ADP
fcis-5200	55	13	the	the	DET
fcis-5200	55	14	sensor	sensor	NOUN
fcis-5200	55	15	network	network	NOUN
fcis-5200	55	16	is	be	AUX
fcis-5200	55	17	uploaded	upload	VERB
fcis-5200	55	18	to	to	ADP
fcis-5200	55	19	the	the	DET
fcis-5200	55	20	service	service	NOUN
fcis-5200	55	21	platform	platform	NOUN
fcis-5200	55	22	,	,	PUNCT
fcis-5200	55	23	and	and	CCONJ
fcis-5200	55	24	the	the	DET
fcis-5200	55	25	data	datum	NOUN
fcis-5200	55	26	from	from	ADP
fcis-5200	55	27	the	the	DET
fcis-5200	55	28	management	management	NOUN
fcis-5200	55	29	platform	platform	NOUN
fcis-5200	55	30	can	can	AUX
fcis-5200	55	31	be	be	AUX
fcis-5200	55	32	received	receive	VERB
fcis-5200	55	33	.	.	PUNCT
fcis-5200	56	1	the	the	DET
fcis-5200	56	2	transmission	transmission	NOUN
fcis-5200	56	3	network	network	NOUN
fcis-5200	56	4	is	be	AUX
fcis-5200	56	5	the	the	DET
fcis-5200	56	6	intermediate	intermediate	ADJ
fcis-5200	56	7	carrier	carrier	NOUN
fcis-5200	56	8	of	of	ADP
fcis-5200	56	9	the	the	DET
fcis-5200	56	10	internet	internet	NOUN
fcis-5200	56	11	of	of	ADP
fcis-5200	56	12	things	thing	NOUN
fcis-5200	56	13	data	datum	NOUN
fcis-5200	56	14	and	and	CCONJ
fcis-5200	56	15	the	the	DET
fcis-5200	56	16	internet	internet	NOUN
fcis-5200	56	17	data	datum	NOUN
fcis-5200	56	18	exchange	exchange	NOUN
fcis-5200	56	19	,	,	PUNCT
fcis-5200	56	20	and	and	CCONJ
fcis-5200	56	21	is	be	AUX
fcis-5200	56	22	the	the	DET
fcis-5200	56	23	terminal	terminal	ADJ
fcis-5200	56	24	access	access	NOUN
fcis-5200	56	25	part	part	NOUN
fcis-5200	56	26	of	of	ADP
fcis-5200	56	27	the	the	DET
fcis-5200	56	28	internet	internet	NOUN
fcis-5200	56	29	.	.	PUNCT
fcis-5200	57	1	in	in	ADP
fcis-5200	57	2	the	the	DET
fcis-5200	57	3	production	production	NOUN
fcis-5200	57	4	process	process	NOUN
fcis-5200	57	5	of	of	ADP
fcis-5200	57	6	coating	coating	NOUN
fcis-5200	57	7	(	(	PUNCT
fcis-5200	57	8	coating	coating	NOUN
fcis-5200	57	9	)	)	PUNCT
fcis-5200	57	10	equipment	equipment	NOUN
fcis-5200	57	11	,	,	PUNCT
fcis-5200	57	12	the	the	DET
fcis-5200	57	13	adoption	adoption	NOUN
fcis-5200	57	14	of	of	ADP
fcis-5200	57	15	network	network	NOUN
fcis-5200	57	16	transmission	transmission	NOUN
fcis-5200	57	17	technology	technology	NOUN
fcis-5200	57	18	is	be	AUX
fcis-5200	57	19	related	relate	VERB
fcis-5200	57	20	to	to	ADP
fcis-5200	57	21	the	the	DET
fcis-5200	57	22	accuracy	accuracy	NOUN
fcis-5200	57	23	,	,	PUNCT
fcis-5200	57	24	integrity	integrity	NOUN
fcis-5200	57	25	,	,	PUNCT
fcis-5200	57	26	reliability	reliability	NOUN
fcis-5200	57	27	and	and	CCONJ
fcis-5200	57	28	real	real	ADJ
fcis-5200	57	29	-	-	PUNCT
fcis-5200	57	30	time	time	NOUN
fcis-5200	57	31	of	of	ADP
fcis-5200	57	32	the	the	DET
fcis-5200	57	33	data	datum	NOUN
fcis-5200	57	34	.	.	PUNCT
fcis-5200	58	1	therefore	therefore	ADV
fcis-5200	58	2	,	,	PUNCT
fcis-5200	58	3	how	how	SCONJ
fcis-5200	58	4	to	to	PART
fcis-5200	58	5	develop	develop	VERB
fcis-5200	58	6	a	a	DET
fcis-5200	58	7	network	network	NOUN
fcis-5200	58	8	transmission	transmission	NOUN
fcis-5200	58	9	module	module	NOUN
fcis-5200	58	10	to	to	PART
fcis-5200	58	11	ensure	ensure	VERB
fcis-5200	58	12	the	the	DET
fcis-5200	58	13	stability	stability	NOUN
fcis-5200	58	14	,	,	PUNCT
fcis-5200	58	15	reliability	reliability	NOUN
fcis-5200	58	16	and	and	CCONJ
fcis-5200	58	17	security	security	NOUN
fcis-5200	58	18	of	of	ADP
fcis-5200	58	19	data	datum	NOUN
fcis-5200	58	20	transmission	transmission	NOUN
fcis-5200	58	21	under	under	ADP
fcis-5200	58	22	the	the	DET
fcis-5200	58	23	environment	environment	NOUN
fcis-5200	58	24	of	of	ADP
fcis-5200	58	25	strong	strong	ADJ
fcis-5200	58	26	industrial	industrial	ADJ
fcis-5200	58	27	production	production	NOUN
fcis-5200	58	28	interference	interference	NOUN
fcis-5200	58	29	is	be	AUX
fcis-5200	58	30	one	one	NUM
fcis-5200	58	31	of	of	ADP
fcis-5200	58	32	the	the	DET
fcis-5200	58	33	research	research	NOUN
fcis-5200	58	34	priorities	priority	NOUN
fcis-5200	58	35	of	of	ADP
fcis-5200	58	36	this	this	DET
fcis-5200	58	37	project	project	NOUN
fcis-5200	58	38	.	.	PUNCT
fcis-5200	59	1	the	the	DET
fcis-5200	59	2	module	module	NOUN
fcis-5200	59	3	needs	need	VERB
fcis-5200	59	4	to	to	PART
fcis-5200	59	5	support	support	VERB
fcis-5200	59	6	232,458	232,458	NUM
fcis-5200	59	7	or	or	CCONJ
fcis-5200	59	8	usb	usb	NOUN
fcis-5200	59	9	interface	interface	NOUN
fcis-5200	59	10	to	to	ADP
fcis-5200	59	11	network	network	NOUN
fcis-5200	59	12	communication	communication	NOUN
fcis-5200	59	13	,	,	PUNCT
fcis-5200	59	14	and	and	CCONJ
fcis-5200	59	15	the	the	DET
fcis-5200	59	16	network	network	NOUN
fcis-5200	59	17	needs	need	VERB
fcis-5200	59	18	to	to	PART
fcis-5200	59	19	support	support	VERB
fcis-5200	59	20	ethernet	ethernet	NOUN
fcis-5200	59	21	,	,	PUNCT
fcis-5200	59	22	wifi	wifi	NOUN
fcis-5200	59	23	,	,	PUNCT
fcis-5200	59	24	4	4	NUM
fcis-5200	59	25	/	/	SYM
fcis-5200	59	26	5	5	NUM
fcis-5200	59	27	g	g	NOUN
fcis-5200	59	28	,	,	PUNCT
fcis-5200	59	29	lora	lora	PROPN
fcis-5200	59	30	,	,	PUNCT
fcis-5200	59	31	or	or	CCONJ
fcis-5200	59	32	nb	nb	NOUN
fcis-5200	59	33	-	-	PUNCT
fcis-5200	59	34	iot	iot	NOUN
fcis-5200	59	35	networks	network	NOUN
fcis-5200	59	36	.	.	PUNCT
fcis-5200	60	1	2.3	2.3	NUM
fcis-5200	60	2	.	.	PUNCT
fcis-5200	61	1	development	development	NOUN
fcis-5200	61	2	of	of	ADP
fcis-5200	61	3	the	the	DET
fcis-5200	61	4	operation	operation	NOUN
fcis-5200	61	5	and	and	CCONJ
fcis-5200	61	6	maintenance	maintenance	NOUN
fcis-5200	61	7	management	management	NOUN
fcis-5200	61	8	and	and	CCONJ
fcis-5200	61	9	monitoring	monitor	VERB
fcis-5200	61	10	platform	platform	NOUN
fcis-5200	61	11	for	for	ADP
fcis-5200	61	12	coating	coat	VERB
fcis-5200	61	13	equipment	equipment	NOUN
fcis-5200	61	14	the	the	DET
fcis-5200	61	15	operation	operation	NOUN
fcis-5200	61	16	and	and	CCONJ
fcis-5200	61	17	maintenance	maintenance	NOUN
fcis-5200	61	18	management	management	NOUN
fcis-5200	61	19	monitoring	monitoring	NOUN
fcis-5200	61	20	platform	platform	NOUN
fcis-5200	61	21	mainly	mainly	ADV
fcis-5200	61	22	include	include	VERB
fcis-5200	61	23	interface	interface	NOUN
fcis-5200	61	24	software	software	NOUN
fcis-5200	61	25	,	,	PUNCT
fcis-5200	61	26	database	database	NOUN
fcis-5200	61	27	software	software	NOUN
fcis-5200	61	28	,	,	PUNCT
fcis-5200	61	29	monitoring	monitor	VERB
fcis-5200	61	30	platform	platform	NOUN
fcis-5200	61	31	software	software	NOUN
fcis-5200	61	32	,	,	PUNCT
fcis-5200	61	33	statistical	statistical	ADJ
fcis-5200	61	34	analysis	analysis	NOUN
fcis-5200	61	35	software	software	NOUN
fcis-5200	61	36	and	and	CCONJ
fcis-5200	61	37	mobile	mobile	ADJ
fcis-5200	61	38	terminal	terminal	NOUN
fcis-5200	61	39	app	app	PROPN
fcis-5200	61	40	.	.	PUNCT
fcis-5200	62	1	(	(	PUNCT
fcis-5200	62	2	1	1	X
fcis-5200	62	3	)	)	PUNCT
fcis-5200	62	4	interface	interface	NOUN
fcis-5200	62	5	software	software	NOUN
fcis-5200	62	6	:	:	PUNCT
fcis-5200	62	7	connect	connect	VERB
fcis-5200	62	8	the	the	DET
fcis-5200	62	9	device	device	NOUN
fcis-5200	62	10	data	datum	NOUN
fcis-5200	62	11	acquisition	acquisition	NOUN
fcis-5200	62	12	and	and	CCONJ
fcis-5200	62	13	monitoring	monitoring	NOUN
fcis-5200	62	14	module	module	NOUN
fcis-5200	62	15	and	and	CCONJ
fcis-5200	62	16	the	the	DET
fcis-5200	62	17	mobile	mobile	ADJ
fcis-5200	62	18	phone	phone	NOUN
fcis-5200	62	19	terminal	terminal	PROPN
fcis-5200	62	20	app	app	NOUN
fcis-5200	62	21	to	to	PART
fcis-5200	62	22	obtain	obtain	VERB
fcis-5200	62	23	the	the	DET
fcis-5200	62	24	uploaded	uploaded	ADJ
fcis-5200	62	25	data	datum	NOUN
fcis-5200	62	26	.	.	PUNCT
fcis-5200	63	1	the	the	DET
fcis-5200	63	2	data	data	NOUN
fcis-5200	63	3	is	be	AUX
fcis-5200	63	4	also	also	ADV
fcis-5200	63	5	stored	store	VERB
fcis-5200	63	6	in	in	ADP
fcis-5200	63	7	the	the	DET
fcis-5200	63	8	database	database	NOUN
fcis-5200	63	9	.	.	PUNCT
fcis-5200	64	1	(	(	PUNCT
fcis-5200	64	2	2	2	X
fcis-5200	64	3	)	)	PUNCT
fcis-5200	64	4	database	database	NOUN
fcis-5200	64	5	software	software	NOUN
fcis-5200	64	6	:	:	PUNCT
fcis-5200	64	7	fixed	fix	VERB
fcis-5200	64	8	parameters	parameter	NOUN
fcis-5200	64	9	,	,	PUNCT
fcis-5200	64	10	operating	operating	NOUN
fcis-5200	64	11	parameters	parameter	NOUN
fcis-5200	64	12	,	,	PUNCT
fcis-5200	64	13	threshold	threshold	NOUN
fcis-5200	64	14	parameters	parameter	NOUN
fcis-5200	64	15	,	,	PUNCT
fcis-5200	64	16	fault	fault	VERB
fcis-5200	64	17	maintenance	maintenance	NOUN
fcis-5200	64	18	data	datum	NOUN
fcis-5200	64	19	of	of	ADP
fcis-5200	64	20	cloud	cloud	ADJ
fcis-5200	64	21	storage	storage	NOUN
fcis-5200	64	22	equipment	equipment	NOUN
fcis-5200	64	23	,	,	PUNCT
fcis-5200	64	24	etc	etc	X
fcis-5200	64	25	.	.	X
fcis-5200	65	1	at	at	ADP
fcis-5200	65	2	the	the	DET
fcis-5200	65	3	same	same	ADJ
fcis-5200	65	4	time	time	NOUN
fcis-5200	65	5	,	,	PUNCT
fcis-5200	65	6	it	it	PRON
fcis-5200	65	7	also	also	ADV
fcis-5200	65	8	has	have	VERB
fcis-5200	65	9	the	the	DET
fcis-5200	65	10	database	database	NOUN
fcis-5200	65	11	disaster	disaster	NOUN
fcis-5200	65	12	recovery	recovery	NOUN
fcis-5200	65	13	and	and	CCONJ
fcis-5200	65	14	backup	backup	ADJ
fcis-5200	65	15	function	function	NOUN
fcis-5200	65	16	.	.	PUNCT
fcis-5200	66	1	(	(	PUNCT
fcis-5200	66	2	3	3	X
fcis-5200	66	3	)	)	PUNCT
fcis-5200	66	4	monitoring	monitor	VERB
fcis-5200	66	5	platform	platform	NOUN
fcis-5200	66	6	software	software	NOUN
fcis-5200	66	7	:	:	PUNCT
fcis-5200	66	8	that	that	PRON
fcis-5200	66	9	is	is	ADV
fcis-5200	66	10	,	,	PUNCT
fcis-5200	66	11	the	the	DET
fcis-5200	66	12	central	central	ADJ
fcis-5200	66	13	largescreen	largescreen	ADJ
fcis-5200	66	14	kanban	kanban	NOUN
fcis-5200	66	15	displays	display	VERB
fcis-5200	66	16	the	the	DET
fcis-5200	66	17	geographical	geographical	ADJ
fcis-5200	66	18	distribution	distribution	NOUN
fcis-5200	66	19	,	,	PUNCT
fcis-5200	66	20	operating	operating	NOUN
fcis-5200	66	21	parameters	parameter	NOUN
fcis-5200	66	22	,	,	PUNCT
fcis-5200	66	23	time	time	NOUN
fcis-5200	66	24	data	datum	NOUN
fcis-5200	66	25	,	,	PUNCT
fcis-5200	66	26	output	output	NOUN
fcis-5200	66	27	data	datum	NOUN
fcis-5200	66	28	,	,	PUNCT
fcis-5200	66	29	quality	quality	NOUN
fcis-5200	66	30	data	datum	NOUN
fcis-5200	66	31	,	,	PUNCT
fcis-5200	66	32	etc	etc	X
fcis-5200	66	33	.	.	X
fcis-5200	66	34	of	of	ADP
fcis-5200	66	35	all	all	DET
fcis-5200	66	36	equipment	equipment	NOUN
fcis-5200	66	37	in	in	ADP
fcis-5200	66	38	real	real	ADJ
fcis-5200	66	39	time	time	NOUN
fcis-5200	66	40	.	.	PUNCT
fcis-5200	67	1	(	(	PUNCT
fcis-5200	67	2	4	4	X
fcis-5200	67	3	)	)	PUNCT
fcis-5200	67	4	statistical	statistical	ADJ
fcis-5200	67	5	analysis	analysis	NOUN
fcis-5200	67	6	software	software	NOUN
fcis-5200	67	7	:	:	PUNCT
fcis-5200	67	8	mainly	mainly	ADV
fcis-5200	67	9	the	the	DET
fcis-5200	67	10	platform	platform	NOUN
fcis-5200	67	11	software	software	NOUN
fcis-5200	67	12	for	for	ADP
fcis-5200	67	13	management	management	NOUN
fcis-5200	67	14	and	and	CCONJ
fcis-5200	67	15	operation	operation	NOUN
fcis-5200	67	16	.	.	PUNCT
fcis-5200	68	1	through	through	ADP
fcis-5200	68	2	big	big	ADJ
fcis-5200	68	3	data	datum	NOUN
fcis-5200	68	4	technology	technology	NOUN
fcis-5200	68	5	,	,	PUNCT
fcis-5200	68	6	all	all	DET
fcis-5200	68	7	the	the	DET
fcis-5200	68	8	uploaded	uploaded	ADJ
fcis-5200	68	9	data	datum	NOUN
fcis-5200	68	10	of	of	ADP
fcis-5200	68	11	the	the	DET
fcis-5200	68	12	equipment	equipment	NOUN
fcis-5200	68	13	are	be	AUX
fcis-5200	68	14	analyzed	analyze	VERB
fcis-5200	68	15	and	and	CCONJ
fcis-5200	68	16	displayed	display	VERB
fcis-5200	68	17	by	by	ADP
fcis-5200	68	18	authority	authority	NOUN
fcis-5200	68	19	and	and	CCONJ
fcis-5200	68	20	modules	module	NOUN
fcis-5200	68	21	,	,	PUNCT
fcis-5200	68	22	including	include	VERB
fcis-5200	68	23	operation	operation	NOUN
fcis-5200	68	24	time	time	NOUN
fcis-5200	68	25	analysis	analysis	NOUN
fcis-5200	68	26	,	,	PUNCT
fcis-5200	68	27	production	production	NOUN
fcis-5200	68	28	data	datum	NOUN
fcis-5200	68	29	analysis	analysis	NOUN
fcis-5200	68	30	,	,	PUNCT
fcis-5200	68	31	production	production	NOUN
fcis-5200	68	32	quality	quality	NOUN
fcis-5200	68	33	analysis	analysis	NOUN
fcis-5200	68	34	,	,	PUNCT
fcis-5200	68	35	energy	energy	NOUN
fcis-5200	68	36	consumption	consumption	NOUN
fcis-5200	68	37	efficacy	efficacy	NOUN
fcis-5200	68	38	analysis	analysis	NOUN
fcis-5200	68	39	,	,	PUNCT
fcis-5200	68	40	health	health	NOUN
fcis-5200	68	41	quality	quality	NOUN
fcis-5200	68	42	analysis	analysis	NOUN
fcis-5200	68	43	,	,	PUNCT
fcis-5200	68	44	fault	fault	NOUN
fcis-5200	68	45	maintenance	maintenance	NOUN
fcis-5200	68	46	statistics	statistic	NOUN
fcis-5200	68	47	and	and	CCONJ
fcis-5200	68	48	operation	operation	NOUN
fcis-5200	68	49	statistics	statistic	NOUN
fcis-5200	68	50	,	,	PUNCT
fcis-5200	68	51	etc	etc	X
fcis-5200	68	52	.	.	X
fcis-5200	68	53	6	6	NUM
fcis-5200	68	54	3	3	NUM
fcis-5200	68	55	.	.	PUNCT
fcis-5200	68	56	system	system	NOUN
fcis-5200	68	57	scheme	scheme	NOUN
fcis-5200	68	58	3.1	3.1	NUM
fcis-5200	68	59	.	.	PUNCT
fcis-5200	68	60	project	project	NOUN
fcis-5200	68	61	implementation	implementation	NOUN
fcis-5200	68	62	plan	plan	NOUN
fcis-5200	68	63	(	(	PUNCT
fcis-5200	68	64	1	1	NUM
fcis-5200	68	65	)	)	PUNCT
fcis-5200	68	66	process	process	NOUN
fcis-5200	68	67	data	datum	NOUN
fcis-5200	68	68	acquisition	acquisition	NOUN
fcis-5200	68	69	technology	technology	NOUN
fcis-5200	68	70	of	of	ADP
fcis-5200	68	71	coating	coat	VERB
fcis-5200	68	72	equipment	equipment	NOUN
fcis-5200	68	73	.	.	PUNCT
fcis-5200	69	1	the	the	DET
fcis-5200	69	2	calculation	calculation	NOUN
fcis-5200	69	3	data	datum	NOUN
fcis-5200	69	4	is	be	AUX
fcis-5200	69	5	collected	collect	VERB
fcis-5200	69	6	by	by	ADP
fcis-5200	69	7	the	the	DET
fcis-5200	69	8	method	method	NOUN
fcis-5200	69	9	of	of	ADP
fcis-5200	69	10	reading	read	VERB
fcis-5200	69	11	the	the	DET
fcis-5200	69	12	communication	communication	NOUN
fcis-5200	69	13	interface	interface	NOUN
fcis-5200	69	14	of	of	ADP
fcis-5200	69	15	the	the	DET
fcis-5200	69	16	plc	plc	PROPN
fcis-5200	69	17	controller	controller	NOUN
fcis-5200	69	18	,	,	PUNCT
fcis-5200	69	19	the	the	DET
fcis-5200	69	20	equipment	equipment	NOUN
fcis-5200	69	21	status	status	NOUN
fcis-5200	69	22	and	and	CCONJ
fcis-5200	69	23	energy	energy	NOUN
fcis-5200	69	24	consumption	consumption	NOUN
fcis-5200	69	25	parameters	parameter	NOUN
fcis-5200	69	26	are	be	AUX
fcis-5200	69	27	analyzed	analyze	VERB
fcis-5200	69	28	by	by	ADP
fcis-5200	69	29	the	the	DET
fcis-5200	69	30	method	method	NOUN
fcis-5200	69	31	of	of	ADP
fcis-5200	69	32	collecting	collect	VERB
fcis-5200	69	33	the	the	DET
fcis-5200	69	34	equipment	equipment	NOUN
fcis-5200	69	35	circuit	circuit	NOUN
fcis-5200	69	36	signals	signal	NOUN
fcis-5200	69	37	,	,	PUNCT
fcis-5200	69	38	and	and	CCONJ
fcis-5200	69	39	the	the	DET
fcis-5200	69	40	process	process	NOUN
fcis-5200	69	41	flow	flow	NOUN
fcis-5200	69	42	parameters	parameter	NOUN
fcis-5200	69	43	are	be	AUX
fcis-5200	69	44	collected	collect	VERB
fcis-5200	69	45	by	by	ADP
fcis-5200	69	46	the	the	DET
fcis-5200	69	47	method	method	NOUN
fcis-5200	69	48	of	of	ADP
fcis-5200	69	49	developing	develop	VERB
fcis-5200	69	50	the	the	DET
fcis-5200	69	51	sensing	sense	VERB
fcis-5200	69	52	device	device	NOUN
fcis-5200	69	53	.	.	PUNCT
fcis-5200	70	1	(	(	PUNCT
fcis-5200	70	2	2	2	NUM
fcis-5200	70	3	)	)	PUNCT
fcis-5200	70	4	transmission	transmission	NOUN
fcis-5200	70	5	and	and	CCONJ
fcis-5200	70	6	communication	communication	NOUN
fcis-5200	70	7	mode	mode	NOUN
fcis-5200	70	8	of	of	ADP
fcis-5200	70	9	coating	coating	NOUN
fcis-5200	70	10	process	process	NOUN
fcis-5200	70	11	data	datum	NOUN
fcis-5200	70	12	.	.	PUNCT
fcis-5200	71	1	the	the	DET
fcis-5200	71	2	communication	communication	NOUN
fcis-5200	71	3	mode	mode	NOUN
fcis-5200	71	4	of	of	ADP
fcis-5200	71	5	wired	wire	VERB
fcis-5200	71	6	network	network	NOUN
fcis-5200	71	7	is	be	AUX
fcis-5200	71	8	adopted	adopt	VERB
fcis-5200	71	9	in	in	ADP
fcis-5200	71	10	the	the	DET
fcis-5200	71	11	working	work	VERB
fcis-5200	71	12	condition	condition	NOUN
fcis-5200	71	13	of	of	ADP
fcis-5200	71	14	the	the	DET
fcis-5200	71	15	new	new	ADJ
fcis-5200	71	16	workshop	workshop	NOUN
fcis-5200	71	17	,	,	PUNCT
fcis-5200	71	18	and	and	CCONJ
fcis-5200	71	19	the	the	DET
fcis-5200	71	20	wireless	wireless	ADJ
fcis-5200	71	21	network	network	NOUN
fcis-5200	71	22	communication	communication	NOUN
fcis-5200	71	23	mode	mode	NOUN
fcis-5200	71	24	is	be	AUX
fcis-5200	71	25	adopted	adopt	VERB
fcis-5200	71	26	in	in	ADP
fcis-5200	71	27	the	the	DET
fcis-5200	71	28	working	work	VERB
fcis-5200	71	29	condition	condition	NOUN
fcis-5200	71	30	of	of	ADP
fcis-5200	71	31	technical	technical	ADJ
fcis-5200	71	32	transformation	transformation	NOUN
fcis-5200	71	33	in	in	ADP
fcis-5200	71	34	the	the	DET
fcis-5200	71	35	existing	exist	VERB
fcis-5200	71	36	workshop	workshop	NOUN
fcis-5200	71	37	.	.	PUNCT
fcis-5200	72	1	long	long	ADJ
fcis-5200	72	2	-	-	PUNCT
fcis-5200	72	3	wave	wave	NOUN
fcis-5200	72	4	communication	communication	NOUN
fcis-5200	72	5	is	be	AUX
fcis-5200	72	6	used	use	VERB
fcis-5200	72	7	in	in	ADP
fcis-5200	72	8	the	the	DET
fcis-5200	72	9	working	work	VERB
fcis-5200	72	10	conditions	condition	NOUN
fcis-5200	72	11	of	of	ADP
fcis-5200	72	12	electromagnetic	electromagnetic	ADJ
fcis-5200	72	13	interference	interference	NOUN
fcis-5200	72	14	and	and	CCONJ
fcis-5200	72	15	communication	communication	NOUN
fcis-5200	72	16	blocking	block	VERB
fcis-5200	72	17	obstacles	obstacle	NOUN
fcis-5200	72	18	,	,	PUNCT
fcis-5200	72	19	and	and	CCONJ
fcis-5200	72	20	short	short	ADJ
fcis-5200	72	21	-	-	PUNCT
fcis-5200	72	22	wave	wave	NOUN
fcis-5200	72	23	communication	communication	NOUN
fcis-5200	72	24	is	be	AUX
fcis-5200	72	25	used	use	VERB
fcis-5200	72	26	in	in	ADP
fcis-5200	72	27	the	the	DET
fcis-5200	72	28	case	case	NOUN
fcis-5200	72	29	of	of	ADP
fcis-5200	72	30	large	large	ADJ
fcis-5200	72	31	amount	amount	NOUN
fcis-5200	72	32	of	of	ADP
fcis-5200	72	33	communication	communication	NOUN
fcis-5200	72	34	data	datum	NOUN
fcis-5200	72	35	.	.	PUNCT
fcis-5200	73	1	(	(	PUNCT
fcis-5200	73	2	3	3	X
fcis-5200	73	3	)	)	PUNCT
fcis-5200	73	4	development	development	NOUN
fcis-5200	73	5	of	of	ADP
fcis-5200	73	6	the	the	DET
fcis-5200	73	7	coating	coating	NOUN
fcis-5200	73	8	process	process	NOUN
fcis-5200	73	9	data	datum	NOUN
fcis-5200	73	10	analysis	analysis	NOUN
fcis-5200	73	11	software	software	NOUN
fcis-5200	73	12	.	.	PUNCT
fcis-5200	74	1	collect	collect	VERB
fcis-5200	74	2	the	the	DET
fcis-5200	74	3	key	key	ADJ
fcis-5200	74	4	process	process	NOUN
fcis-5200	74	5	node	node	NOUN
fcis-5200	74	6	parameters	parameter	NOUN
fcis-5200	74	7	according	accord	VERB
fcis-5200	74	8	to	to	ADP
fcis-5200	74	9	the	the	DET
fcis-5200	74	10	coating	coating	NOUN
fcis-5200	74	11	process	process	NOUN
fcis-5200	74	12	flow	flow	NOUN
fcis-5200	74	13	,	,	PUNCT
fcis-5200	74	14	predict	predict	VERB
fcis-5200	74	15	the	the	DET
fcis-5200	74	16	production	production	NOUN
fcis-5200	74	17	abnormality	abnormality	NOUN
fcis-5200	74	18	and	and	CCONJ
fcis-5200	74	19	equipment	equipment	NOUN
fcis-5200	74	20	abnormality	abnormality	NOUN
fcis-5200	74	21	according	accord	VERB
fcis-5200	74	22	to	to	ADP
fcis-5200	74	23	the	the	DET
fcis-5200	74	24	process	process	NOUN
fcis-5200	74	25	node	node	NOUN
fcis-5200	74	26	parameters	parameter	NOUN
fcis-5200	74	27	,	,	PUNCT
fcis-5200	74	28	and	and	CCONJ
fcis-5200	74	29	analyze	analyze	VERB
fcis-5200	74	30	the	the	DET
fcis-5200	74	31	product	product	NOUN
fcis-5200	74	32	quality	quality	NOUN
fcis-5200	74	33	.	.	PUNCT
fcis-5200	75	1	figure	figure	NOUN
fcis-5200	75	2	1	1	NUM
fcis-5200	75	3	.	.	PUNCT
fcis-5200	76	1	technical	technical	ADJ
fcis-5200	76	2	route	route	NOUN
fcis-5200	76	3	of	of	ADP
fcis-5200	76	4	digital	digital	ADJ
fcis-5200	76	5	technology	technology	NOUN
fcis-5200	76	6	development	development	NOUN
fcis-5200	76	7	of	of	ADP
fcis-5200	76	8	coating	coating	NOUN
fcis-5200	76	9	equipment	equipment	NOUN
fcis-5200	76	10	3.2	3.2	NUM
fcis-5200	76	11	.	.	PUNCT
fcis-5200	77	1	technical	technical	PROPN
fcis-5200	77	2	route	route	PROPN
fcis-5200	77	3	technical	technical	PROPN
fcis-5200	77	4	route	route	PROPN
fcis-5200	77	5	is	be	AUX
fcis-5200	77	6	shown	show	VERB
fcis-5200	77	7	in	in	ADP
fcis-5200	77	8	figure	figure	NOUN
fcis-5200	77	9	1	1	NUM
fcis-5200	77	10	,	,	PUNCT
fcis-5200	77	11	including	include	VERB
fcis-5200	77	12	coating	coat	VERB
fcis-5200	77	13	(	(	PUNCT
fcis-5200	77	14	coating	coating	NOUN
fcis-5200	77	15	)	)	PUNCT
fcis-5200	77	16	equipment	equipment	NOUN
fcis-5200	77	17	digital	digital	ADJ
fcis-5200	77	18	operational	operational	ADJ
fcis-5200	77	19	requirements	requirement	NOUN
fcis-5200	77	20	research	research	NOUN
fcis-5200	77	21	analysis	analysis	NOUN
fcis-5200	77	22	,	,	PUNCT
fcis-5200	77	23	analysis	analysis	NOUN
fcis-5200	77	24	of	of	ADP
fcis-5200	77	25	process	process	NOUN
fcis-5200	77	26	parameters	parameter	NOUN
fcis-5200	77	27	,	,	PUNCT
fcis-5200	77	28	equipment	equipment	NOUN
fcis-5200	77	29	electrical	electrical	ADJ
fcis-5200	77	30	structure	structure	NOUN
fcis-5200	77	31	and	and	CCONJ
fcis-5200	77	32	interface	interface	NOUN
fcis-5200	77	33	analysis	analysis	NOUN
fcis-5200	77	34	,	,	PUNCT
fcis-5200	77	35	processing	processing	NOUN
fcis-5200	77	36	parameters	parameter	NOUN
fcis-5200	77	37	and	and	CCONJ
fcis-5200	77	38	equipment	equipment	NOUN
fcis-5200	77	39	status	status	NOUN
fcis-5200	77	40	energy	energy	NOUN
fcis-5200	77	41	parameter	parameter	PROPN
fcis-5200	77	42	acquisition	acquisition	PROPN
fcis-5200	77	43	,	,	PUNCT
fcis-5200	77	44	data	data	NOUN
fcis-5200	77	45	transmission	transmission	NOUN
fcis-5200	77	46	,	,	PUNCT
fcis-5200	77	47	database	database	NOUN
fcis-5200	77	48	and	and	CCONJ
fcis-5200	77	49	server	server	NOUN
fcis-5200	77	50	development	development	NOUN
fcis-5200	77	51	,	,	PUNCT
fcis-5200	77	52	data	datum	NOUN
fcis-5200	77	53	processing	processing	NOUN
fcis-5200	77	54	analysis	analysis	NOUN
fcis-5200	77	55	,	,	PUNCT
fcis-5200	77	56	software	software	NOUN
fcis-5200	77	57	compatible	compatible	ADJ
fcis-5200	77	58	design	design	NOUN
fcis-5200	77	59	,	,	PUNCT
fcis-5200	77	60	popularization	popularization	NOUN
fcis-5200	77	61	and	and	CCONJ
fcis-5200	77	62	application	application	NOUN
fcis-5200	77	63	,	,	PUNCT
fcis-5200	77	64	etc	etc	X
fcis-5200	77	65	.	.	X
fcis-5200	77	66	data	datum	NOUN
fcis-5200	77	67	processing	processing	NOUN
fcis-5200	77	68	and	and	CCONJ
fcis-5200	77	69	analysis	analysis	NOUN
fcis-5200	77	70	include	include	VERB
fcis-5200	77	71	analysis	analysis	NOUN
fcis-5200	77	72	of	of	ADP
fcis-5200	77	73	product	product	NOUN
fcis-5200	77	74	performance	performance	NOUN
fcis-5200	77	75	,	,	PUNCT
fcis-5200	77	76	output	output	NOUN
fcis-5200	77	77	,	,	PUNCT
fcis-5200	77	78	production	production	NOUN
fcis-5200	77	79	schedule	schedule	NOUN
fcis-5200	77	80	,	,	PUNCT
fcis-5200	77	81	equipment	equipment	NOUN
fcis-5200	77	82	status	status	NOUN
fcis-5200	77	83	,	,	PUNCT
fcis-5200	77	84	monitoring	monitoring	NOUN
fcis-5200	77	85	of	of	ADP
fcis-5200	77	86	production	production	NOUN
fcis-5200	77	87	process	process	NOUN
fcis-5200	77	88	and	and	CCONJ
fcis-5200	77	89	equipment	equipment	NOUN
fcis-5200	77	90	abnormalities	abnormality	NOUN
fcis-5200	77	91	;	;	PUNCT
fcis-5200	77	92	software	software	NOUN
fcis-5200	77	93	compatibility	compatibility	NOUN
fcis-5200	77	94	design	design	NOUN
fcis-5200	77	95	refers	refer	VERB
fcis-5200	77	96	to	to	ADP
fcis-5200	77	97	the	the	DET
fcis-5200	77	98	interface	interface	NOUN
fcis-5200	77	99	design	design	NOUN
fcis-5200	77	100	of	of	ADP
fcis-5200	77	101	the	the	DET
fcis-5200	77	102	software	software	NOUN
fcis-5200	77	103	layer	layer	NOUN
fcis-5200	77	104	,	,	PUNCT
fcis-5200	77	105	erp	erp	NOUN
fcis-5200	77	106	,	,	PUNCT
fcis-5200	77	107	mes	me	NOUN
fcis-5200	77	108	and	and	CCONJ
fcis-5200	77	109	other	other	ADJ
fcis-5200	77	110	industrial	industrial	ADJ
fcis-5200	77	111	software	software	NOUN
fcis-5200	77	112	;	;	PUNCT
fcis-5200	77	113	promotion	promotion	NOUN
fcis-5200	77	114	and	and	CCONJ
fcis-5200	77	115	application	application	NOUN
fcis-5200	77	116	is	be	AUX
fcis-5200	77	117	the	the	DET
fcis-5200	77	118	monitoring	monitoring	NOUN
fcis-5200	77	119	application	application	NOUN
fcis-5200	77	120	of	of	ADP
fcis-5200	77	121	data	datum	NOUN
fcis-5200	77	122	collection	collection	NOUN
fcis-5200	77	123	,	,	PUNCT
fcis-5200	77	124	transmission	transmission	NOUN
fcis-5200	77	125	,	,	PUNCT
fcis-5200	77	126	processing	processing	NOUN
fcis-5200	77	127	and	and	CCONJ
fcis-5200	77	128	other	other	ADJ
fcis-5200	77	129	related	related	ADJ
fcis-5200	77	130	technologies	technology	NOUN
fcis-5200	77	131	to	to	ADP
fcis-5200	77	132	other	other	ADJ
fcis-5200	77	133	electromechanical	electromechanical	ADJ
fcis-5200	77	134	component	component	NOUN
fcis-5200	77	135	processing	processing	NOUN
fcis-5200	77	136	equipment	equipment	NOUN
fcis-5200	77	137	and	and	CCONJ
fcis-5200	77	138	processes	process	NOUN
fcis-5200	77	139	.	.	PUNCT
fcis-5200	78	1	4	4	X
fcis-5200	78	2	.	.	X
fcis-5200	78	3	system	system	NOUN
fcis-5200	78	4	design	design	VERB
fcis-5200	78	5	the	the	DET
fcis-5200	78	6	system	system	NOUN
fcis-5200	78	7	is	be	AUX
fcis-5200	78	8	mainly	mainly	ADV
fcis-5200	78	9	composed	compose	VERB
fcis-5200	78	10	of	of	ADP
fcis-5200	78	11	data	data	NOUN
fcis-5200	78	12	collector	collector	NOUN
fcis-5200	78	13	,	,	PUNCT
fcis-5200	78	14	process	process	NOUN
fcis-5200	78	15	operator	operator	NOUN
fcis-5200	78	16	,	,	PUNCT
fcis-5200	78	17	database	database	NOUN
fcis-5200	78	18	and	and	CCONJ
fcis-5200	78	19	data	datum	NOUN
fcis-5200	78	20	kanban	kanban	PROPN
fcis-5200	78	21	.	.	PUNCT
fcis-5200	79	1	the	the	DET
fcis-5200	79	2	data	data	NOUN
fcis-5200	79	3	collector	collector	NOUN
fcis-5200	79	4	is	be	AUX
fcis-5200	79	5	responsible	responsible	ADJ
fcis-5200	79	6	for	for	ADP
fcis-5200	79	7	collecting	collect	VERB
fcis-5200	79	8	the	the	DET
fcis-5200	79	9	process	process	NOUN
fcis-5200	79	10	parameters	parameter	NOUN
fcis-5200	79	11	of	of	ADP
fcis-5200	79	12	the	the	DET
fcis-5200	79	13	coating	coating	NOUN
fcis-5200	79	14	equipment	equipment	NOUN
fcis-5200	79	15	,	,	PUNCT
fcis-5200	79	16	including	include	VERB
fcis-5200	79	17	voltage	voltage	NOUN
fcis-5200	79	18	,	,	PUNCT
fcis-5200	79	19	current	current	ADJ
fcis-5200	79	20	,	,	PUNCT
fcis-5200	79	21	power	power	NOUN
fcis-5200	79	22	,	,	PUNCT
fcis-5200	79	23	power	power	NOUN
fcis-5200	79	24	consumption	consumption	NOUN
fcis-5200	79	25	,	,	PUNCT
fcis-5200	79	26	temperature	temperature	NOUN
fcis-5200	79	27	and	and	CCONJ
fcis-5200	79	28	vacuum	vacuum	NOUN
fcis-5200	79	29	;	;	PUNCT
fcis-5200	79	30	the	the	DET
fcis-5200	79	31	process	process	NOUN
fcis-5200	79	32	operation	operation	NOUN
fcis-5200	79	33	station	station	NOUN
fcis-5200	79	34	is	be	AUX
fcis-5200	79	35	operated	operate	VERB
fcis-5200	79	36	by	by	ADP
fcis-5200	79	37	man	man	NOUN
fcis-5200	79	38	to	to	PART
fcis-5200	79	39	record	record	VERB
fcis-5200	79	40	the	the	DET
fcis-5200	79	41	start	start	NOUN
fcis-5200	79	42	time	time	NOUN
fcis-5200	79	43	of	of	ADP
fcis-5200	79	44	the	the	DET
fcis-5200	79	45	experiment	experiment	NOUN
fcis-5200	79	46	and	and	CCONJ
fcis-5200	79	47	the	the	DET
fcis-5200	79	48	start	start	NOUN
fcis-5200	79	49	and	and	CCONJ
fcis-5200	79	50	end	end	VERB
fcis-5200	79	51	time	time	NOUN
fcis-5200	79	52	of	of	ADP
fcis-5200	79	53	each	each	DET
fcis-5200	79	54	process	process	NOUN
fcis-5200	79	55	.	.	PUNCT
fcis-5200	80	1	the	the	DET
fcis-5200	80	2	collected	collect	VERB
fcis-5200	80	3	equipment	equipment	NOUN
fcis-5200	80	4	data	datum	NOUN
fcis-5200	80	5	is	be	AUX
fcis-5200	80	6	transmitted	transmit	VERB
fcis-5200	80	7	to	to	ADP
fcis-5200	80	8	the	the	DET
fcis-5200	80	9	database	database	NOUN
fcis-5200	80	10	through	through	ADP
fcis-5200	80	11	4	4	NUM
fcis-5200	80	12	g	g	NOUN
fcis-5200	80	13	,	,	PUNCT
fcis-5200	80	14	ethernet	ethernet	NOUN
fcis-5200	80	15	,	,	PUNCT
fcis-5200	80	16	wifi	wifi	NOUN
fcis-5200	80	17	and	and	CCONJ
fcis-5200	80	18	other	other	ADJ
fcis-5200	80	19	communication	communication	NOUN
fcis-5200	80	20	methods	method	NOUN
fcis-5200	80	21	,	,	PUNCT
fcis-5200	80	22	and	and	CCONJ
fcis-5200	80	23	is	be	AUX
fcis-5200	80	24	monitored	monitor	VERB
fcis-5200	80	25	through	through	ADP
fcis-5200	80	26	the	the	DET
fcis-5200	80	27	data	datum	NOUN
fcis-5200	80	28	kanban	kanban	NOUN
fcis-5200	80	29	,	,	PUNCT
fcis-5200	80	30	as	as	SCONJ
fcis-5200	80	31	shown	show	VERB
fcis-5200	80	32	in	in	ADP
fcis-5200	80	33	figure	figure	NOUN
fcis-5200	80	34	2	2	NUM
fcis-5200	80	35	.	.	PUNCT
fcis-5200	80	36	figure	figure	NOUN
fcis-5200	80	37	2	2	NUM
fcis-5200	80	38	.	.	PUNCT
fcis-5200	80	39	overall	overall	ADJ
fcis-5200	80	40	system	system	NOUN
fcis-5200	80	41	design	design	VERB
fcis-5200	80	42	4.1	4.1	NUM
fcis-5200	80	43	.	.	PUNCT
fcis-5200	81	1	hardware	hardware	NOUN
fcis-5200	81	2	design	design	VERB
fcis-5200	81	3	the	the	DET
fcis-5200	81	4	data	data	NOUN
fcis-5200	81	5	acquisition	acquisition	NOUN
fcis-5200	81	6	device	device	NOUN
fcis-5200	81	7	adopts	adopt	VERB
fcis-5200	81	8	the	the	DET
fcis-5200	81	9	control	control	NOUN
fcis-5200	81	10	module	module	NOUN
fcis-5200	81	11	with	with	ADP
fcis-5200	81	12	stm	stm	PROPN
fcis-5200	81	13	32	32	NUM
fcis-5200	81	14	su	su	PROPN
fcis-5200	81	15	as	as	ADP
fcis-5200	81	16	the	the	DET
fcis-5200	81	17	core	core	NOUN
fcis-5200	81	18	and	and	CCONJ
fcis-5200	81	19	4	4	NUM
fcis-5200	81	20	g	g	NOUN
fcis-5200	81	21	module	module	NOUN
fcis-5200	81	22	,	,	PUNCT
fcis-5200	81	23	ethernet	ethernet	NOUN
fcis-5200	81	24	module	module	NOUN
fcis-5200	81	25	,	,	PUNCT
fcis-5200	81	26	rs	rs	NOUN
fcis-5200	81	27	232	232	NUM
fcis-5200	81	28	module	module	NOUN
fcis-5200	81	29	and	and	CCONJ
fcis-5200	81	30	rs	rs	ADJ
fcis-5200	81	31	485	485	NUM
fcis-5200	81	32	module	module	NOUN
fcis-5200	81	33	as	as	ADP
fcis-5200	81	34	the	the	DET
fcis-5200	81	35	main	main	ADJ
fcis-5200	81	36	communication	communication	NOUN
fcis-5200	81	37	modules	module	NOUN
fcis-5200	81	38	to	to	PART
fcis-5200	81	39	realize	realize	VERB
fcis-5200	81	40	the	the	DET
fcis-5200	81	41	production	production	NOUN
fcis-5200	81	42	process	process	NOUN
fcis-5200	81	43	data	datum	NOUN
fcis-5200	81	44	acquisition	acquisition	NOUN
fcis-5200	81	45	of	of	ADP
fcis-5200	81	46	the	the	DET
fcis-5200	81	47	coating	coating	NOUN
fcis-5200	81	48	equipment	equipment	NOUN
fcis-5200	81	49	,	,	PUNCT
fcis-5200	81	50	as	as	SCONJ
fcis-5200	81	51	shown	show	VERB
fcis-5200	81	52	in	in	ADP
fcis-5200	81	53	figure	figure	NOUN
fcis-5200	81	54	3	3	NUM
fcis-5200	81	55	.	.	PUNCT
fcis-5200	81	56	figure	figure	VERB
fcis-5200	81	57	3	3	NUM
fcis-5200	81	58	.	.	NOUN
fcis-5200	81	59	hardware	hardware	NOUN
fcis-5200	81	60	system	system	NOUN
fcis-5200	81	61	and	and	CCONJ
fcis-5200	81	62	data	datum	NOUN
fcis-5200	81	63	collector	collector	NOUN
fcis-5200	81	64	4.2	4.2	NUM
fcis-5200	81	65	.	.	PUNCT
fcis-5200	82	1	software	software	NOUN
fcis-5200	82	2	design	design	VERB
fcis-5200	82	3	the	the	DET
fcis-5200	82	4	data	datum	NOUN
fcis-5200	82	5	kanban	kanban	NOUN
fcis-5200	82	6	displays	display	VERB
fcis-5200	82	7	the	the	DET
fcis-5200	82	8	collected	collect	VERB
fcis-5200	82	9	power	power	NOUN
fcis-5200	82	10	supply	supply	NOUN
fcis-5200	82	11	data	datum	NOUN
fcis-5200	82	12	,	,	PUNCT
fcis-5200	82	13	energy	energy	NOUN
fcis-5200	82	14	consumption	consumption	NOUN
fcis-5200	82	15	data	datum	NOUN
fcis-5200	82	16	,	,	PUNCT
fcis-5200	82	17	production	production	NOUN
fcis-5200	82	18	data	datum	NOUN
fcis-5200	82	19	and	and	CCONJ
fcis-5200	82	20	process	process	NOUN
fcis-5200	82	21	console	console	NOUN
fcis-5200	82	22	operation	operation	NOUN
fcis-5200	82	23	records	record	NOUN
fcis-5200	82	24	through	through	ADP
fcis-5200	82	25	the	the	DET
fcis-5200	82	26	kanban	kanban	NOUN
fcis-5200	82	27	and	and	CCONJ
fcis-5200	82	28	alarms	alarm	VERB
fcis-5200	82	29	the	the	DET
fcis-5200	82	30	abnormal	abnormal	ADJ
fcis-5200	82	31	data	datum	NOUN
fcis-5200	82	32	to	to	PART
fcis-5200	82	33	realize	realize	VERB
fcis-5200	82	34	the	the	DET
fcis-5200	82	35	real	real	ADJ
fcis-5200	82	36	-	-	PUNCT
fcis-5200	82	37	time	time	NOUN
fcis-5200	82	38	monitoring	monitoring	NOUN
fcis-5200	82	39	of	of	ADP
fcis-5200	82	40	the	the	DET
fcis-5200	82	41	production	production	NOUN
fcis-5200	82	42	process	process	NOUN
fcis-5200	82	43	data	datum	NOUN
fcis-5200	82	44	of	of	ADP
fcis-5200	82	45	the	the	DET
fcis-5200	82	46	coating	coating	NOUN
fcis-5200	82	47	equipment	equipment	NOUN
fcis-5200	82	48	,	,	PUNCT
fcis-5200	82	49	as	as	SCONJ
fcis-5200	82	50	shown	show	VERB
fcis-5200	82	51	in	in	ADP
fcis-5200	82	52	figure	figure	NOUN
fcis-5200	82	53	4	4	NUM
fcis-5200	82	54	.	.	PUNCT
fcis-5200	83	1	at	at	ADP
fcis-5200	83	2	the	the	DET
fcis-5200	83	3	same	same	ADJ
fcis-5200	83	4	time	time	NOUN
fcis-5200	83	5	,	,	PUNCT
fcis-5200	83	6	the	the	DET
fcis-5200	83	7	start	start	NOUN
fcis-5200	83	8	and	and	CCONJ
fcis-5200	83	9	end	end	VERB
fcis-5200	83	10	time	time	NOUN
fcis-5200	83	11	of	of	ADP
fcis-5200	83	12	each	each	DET
fcis-5200	83	13	process	process	NOUN
fcis-5200	83	14	node	node	NOUN
fcis-5200	83	15	can	can	AUX
fcis-5200	83	16	be	be	AUX
fcis-5200	83	17	recorded	record	VERB
fcis-5200	83	18	through	through	ADP
fcis-5200	83	19	the	the	DET
fcis-5200	83	20	process	process	NOUN
fcis-5200	83	21	operation	operation	NOUN
fcis-5200	83	22	table	table	NOUN
fcis-5200	83	23	,	,	PUNCT
fcis-5200	83	24	so	so	SCONJ
fcis-5200	83	25	as	as	SCONJ
fcis-5200	83	26	to	to	PART
fcis-5200	83	27	realize	realize	VERB
fcis-5200	83	28	the	the	DET
fcis-5200	83	29	considerable	considerable	ADJ
fcis-5200	83	30	and	and	CCONJ
fcis-5200	83	31	controllable	controllable	ADJ
fcis-5200	83	32	time	time	NOUN
fcis-5200	83	33	of	of	ADP
fcis-5200	83	34	each	each	DET
fcis-5200	83	35	process	process	NOUN
fcis-5200	83	36	,	,	PUNCT
fcis-5200	83	37	as	as	SCONJ
fcis-5200	83	38	shown	show	VERB
fcis-5200	83	39	in	in	ADP
fcis-5200	83	40	figure	figure	NOUN
fcis-5200	83	41	5	5	NUM
fcis-5200	83	42	.	.	SYM
fcis-5200	83	43	7	7	NUM
fcis-5200	83	44	figure	figure	NOUN
fcis-5200	83	45	4	4	NUM
fcis-5200	83	46	.	.	PUNCT
fcis-5200	83	47	data	datum	NOUN
fcis-5200	83	48	display	display	NOUN
fcis-5200	83	49	figure	figure	NOUN
fcis-5200	83	50	5	5	NUM
fcis-5200	83	51	.	.	PUNCT
fcis-5200	83	52	process	process	NOUN
fcis-5200	83	53	operation	operation	NOUN
fcis-5200	83	54	5	5	NUM
fcis-5200	83	55	.	.	PUNCT
fcis-5200	83	56	conclusion	conclusion	NOUN
fcis-5200	83	57	in	in	ADP
fcis-5200	83	58	this	this	DET
fcis-5200	83	59	paper	paper	NOUN
fcis-5200	83	60	,	,	PUNCT
fcis-5200	83	61	a	a	DET
fcis-5200	83	62	data	data	NOUN
fcis-5200	83	63	acquisition	acquisition	NOUN
fcis-5200	83	64	module	module	NOUN
fcis-5200	83	65	serving	serve	VERB
fcis-5200	83	66	the	the	DET
fcis-5200	83	67	information	information	NOUN
fcis-5200	83	68	collection	collection	NOUN
fcis-5200	83	69	of	of	ADP
fcis-5200	83	70	coating	coating	NOUN
fcis-5200	83	71	(	(	PUNCT
fcis-5200	83	72	coating	coating	NOUN
fcis-5200	83	73	)	)	PUNCT
fcis-5200	83	74	production	production	NOUN
fcis-5200	83	75	equipment	equipment	NOUN
fcis-5200	83	76	is	be	AUX
fcis-5200	83	77	developed	develop	VERB
fcis-5200	83	78	for	for	ADP
fcis-5200	83	79	sensing	sense	VERB
fcis-5200	83	80	and	and	CCONJ
fcis-5200	83	81	processing	process	VERB
fcis-5200	83	82	the	the	DET
fcis-5200	83	83	status	status	NOUN
fcis-5200	83	84	of	of	ADP
fcis-5200	83	85	the	the	DET
fcis-5200	83	86	production	production	NOUN
fcis-5200	83	87	equipment	equipment	NOUN
fcis-5200	83	88	and	and	CCONJ
fcis-5200	83	89	product	product	NOUN
fcis-5200	83	90	process	process	NOUN
fcis-5200	83	91	,	,	PUNCT
fcis-5200	83	92	so	so	SCONJ
fcis-5200	83	93	as	as	SCONJ
fcis-5200	83	94	to	to	PART
fcis-5200	83	95	realize	realize	VERB
fcis-5200	83	96	the	the	DET
fcis-5200	83	97	remote	remote	ADJ
fcis-5200	83	98	monitoring	monitoring	NOUN
fcis-5200	83	99	and	and	CCONJ
fcis-5200	83	100	management	management	NOUN
fcis-5200	83	101	of	of	ADP
fcis-5200	83	102	the	the	DET
fcis-5200	83	103	production	production	NOUN
fcis-5200	83	104	process	process	NOUN
fcis-5200	83	105	.	.	PUNCT
fcis-5200	84	1	and	and	CCONJ
fcis-5200	84	2	develop	develop	VERB
fcis-5200	84	3	a	a	DET
fcis-5200	84	4	data	data	NOUN
fcis-5200	84	5	processing	processing	NOUN
fcis-5200	84	6	system	system	NOUN
fcis-5200	84	7	based	base	VERB
fcis-5200	84	8	on	on	ADP
fcis-5200	84	9	front	front	ADJ
fcis-5200	84	10	-	-	PUNCT
fcis-5200	84	11	end	end	NOUN
fcis-5200	84	12	data	data	NOUN
fcis-5200	84	13	acquisition	acquisition	NOUN
fcis-5200	84	14	module	module	NOUN
fcis-5200	84	15	.	.	PUNCT
fcis-5200	85	1	the	the	DET
fcis-5200	85	2	data	data	NOUN
fcis-5200	85	3	processing	processing	NOUN
fcis-5200	85	4	system	system	NOUN
fcis-5200	85	5	is	be	AUX
fcis-5200	85	6	used	use	VERB
fcis-5200	85	7	to	to	PART
fcis-5200	85	8	organize	organize	VERB
fcis-5200	85	9	and	and	CCONJ
fcis-5200	85	10	process	process	VERB
fcis-5200	85	11	the	the	DET
fcis-5200	85	12	data	datum	NOUN
fcis-5200	85	13	and	and	CCONJ
fcis-5200	85	14	parameters	parameter	NOUN
fcis-5200	85	15	of	of	ADP
fcis-5200	85	16	the	the	DET
fcis-5200	85	17	production	production	NOUN
fcis-5200	85	18	process	process	NOUN
fcis-5200	85	19	collected	collect	VERB
fcis-5200	85	20	by	by	ADP
fcis-5200	85	21	the	the	DET
fcis-5200	85	22	frontend	frontend	NOUN
fcis-5200	85	23	acquisition	acquisition	NOUN
fcis-5200	85	24	module	module	NOUN
fcis-5200	85	25	,	,	PUNCT
fcis-5200	85	26	analyze	analyze	VERB
fcis-5200	85	27	the	the	DET
fcis-5200	85	28	current	current	ADJ
fcis-5200	85	29	production	production	NOUN
fcis-5200	85	30	equipment	equipment	NOUN
fcis-5200	85	31	and	and	CCONJ
fcis-5200	85	32	product	product	NOUN
fcis-5200	85	33	process	process	NOUN
fcis-5200	85	34	,	,	PUNCT
fcis-5200	85	35	and	and	CCONJ
fcis-5200	85	36	realize	realize	VERB
fcis-5200	85	37	the	the	DET
fcis-5200	85	38	monitoring	monitoring	NOUN
fcis-5200	85	39	and	and	CCONJ
fcis-5200	85	40	management	management	NOUN
fcis-5200	85	41	of	of	ADP
fcis-5200	85	42	the	the	DET
fcis-5200	85	43	production	production	NOUN
fcis-5200	85	44	process	process	NOUN
fcis-5200	85	45	.	.	PUNCT
fcis-5200	86	1	the	the	DET
fcis-5200	86	2	research	research	NOUN
fcis-5200	86	3	work	work	NOUN
fcis-5200	86	4	in	in	ADP
fcis-5200	86	5	this	this	DET
fcis-5200	86	6	paper	paper	NOUN
fcis-5200	86	7	can	can	AUX
fcis-5200	86	8	provide	provide	VERB
fcis-5200	86	9	the	the	DET
fcis-5200	86	10	engineering	engineering	NOUN
fcis-5200	86	11	application	application	NOUN
fcis-5200	86	12	basis	basis	NOUN
fcis-5200	86	13	for	for	ADP
fcis-5200	86	14	the	the	DET
fcis-5200	86	15	digital	digital	ADJ
fcis-5200	86	16	transformation	transformation	NOUN
fcis-5200	86	17	of	of	ADP
fcis-5200	86	18	factories	factory	NOUN
fcis-5200	86	19	.	.	PUNCT
fcis-5200	87	1	acknowledgment	acknowledgment	NOUN
fcis-5200	87	2	the	the	DET
fcis-5200	87	3	this	this	DET
fcis-5200	87	4	work	work	NOUN
fcis-5200	87	5	was	be	AUX
fcis-5200	87	6	supported	support	VERB
fcis-5200	87	7	by	by	ADP
fcis-5200	87	8	the	the	DET
fcis-5200	87	9	project	project	NOUN
fcis-5200	87	10	of	of	ADP
fcis-5200	87	11	wenzhou	wenzhou	PROPN
fcis-5200	87	12	science	science	PROPN
fcis-5200	87	13	and	and	CCONJ
fcis-5200	87	14	technology	technology	PROPN
fcis-5200	87	15	bureau	bureau	NOUN
fcis-5200	87	16	under	under	ADP
fcis-5200	87	17	grant	grant	PROPN
fcis-5200	87	18	g2020012	g2020012	PROPN
fcis-5200	87	19	.	.	PUNCT
fcis-5200	88	1	references	reference	NOUN
fcis-5200	88	2	[	[	X
fcis-5200	88	3	1	1	NUM
fcis-5200	88	4	]	]	X
fcis-5200	88	5	huang	huang	PROPN
fcis-5200	88	6	,	,	PUNCT
fcis-5200	88	7	q	q	PROPN
fcis-5200	88	8	,	,	PUNCT
fcis-5200	88	9	li	li	PROPN
fcis-5200	88	10	,	,	PUNCT
fcis-5200	88	11	t	t	PROPN
fcis-5200	88	12	,	,	PUNCT
fcis-5200	88	13	yang	yang	PROPN
fcis-5200	88	14	,	,	PUNCT
fcis-5200	88	15	x	x	PROPN
fcis-5200	88	16	,	,	PUNCT
fcis-5200	88	17	.(2019).dynamical	.(2019).dynamical	PROPN
fcis-5200	88	18	information	information	NOUN
fcis-5200	88	19	fusion	fusion	NOUN
fcis-5200	88	20	of	of	ADP
fcis-5200	88	21	multisource	multisource	ADJ
fcis-5200	88	22	incomplete	incomplete	ADJ
fcis-5200	88	23	hybrid	hybrid	ADJ
fcis-5200	88	24	information	information	NOUN
fcis-5200	88	25	systems	system	NOUN
fcis-5200	88	26	based	base	VERB
fcis-5200	88	27	on	on	ADP
fcis-5200	88	28	conditional	conditional	ADJ
fcis-5200	88	29	entropy.ieee	entropy.ieee	PROPN
fcis-5200	88	30	14th	14th	ADJ
fcis-5200	88	31	international	international	ADJ
fcis-5200	88	32	conference	conference	NOUN
fcis-5200	88	33	on	on	ADP
fcis-5200	88	34	intelligent	intelligent	ADJ
fcis-5200	88	35	systems	system	NOUN
fcis-5200	88	36	and	and	CCONJ
fcis-5200	88	37	knowledge	knowledge	NOUN
fcis-5200	88	38	engineering	engineering	PROPN
fcis-5200	88	39	(	(	PUNCT
fcis-5200	88	40	iske	iske	PROPN
fcis-5200	88	41	)	)	PUNCT
fcis-5200	88	42	,	,	PUNCT
fcis-5200	88	43	2019	2019	NUM
fcis-5200	88	44	.	.	PUNCT
fcis-5200	89	1	[	[	X
fcis-5200	89	2	2	2	NUM
fcis-5200	89	3	]	]	PUNCT
fcis-5200	89	4	toward	toward	ADP
fcis-5200	89	5	secure	secure	ADJ
fcis-5200	89	6	data	datum	NOUN
fcis-5200	89	7	fusion	fusion	NOUN
fcis-5200	89	8	in	in	ADP
fcis-5200	89	9	industrial	industrial	ADJ
fcis-5200	89	10	iot	iot	NOUN
fcis-5200	89	11	using	use	VERB
fcis-5200	89	12	transfer	transfer	NOUN
fcis-5200	89	13	learning[j].ieee	learning[j].ieee	NOUN
fcis-5200	89	14	transactions	transaction	NOUN
fcis-5200	89	15	on	on	ADP
fcis-5200	89	16	industrial	industrial	ADJ
fcis-5200	89	17	informatics	informatic	NOUN
fcis-5200	89	18	,	,	PUNCT
fcis-5200	89	19	2021	2021	NUM
fcis-5200	89	20	.	.	PUNCT
fcis-5200	90	1	doi	doi	PROPN
fcis-5200	90	2	10.1109	10.1109	NUM
fcis-5200	90	3	/	/	SYM
fcis-5200	90	4	tii.2020.3038780	tii.2020.3038780	NOUN
fcis-5200	90	5	.	.	PUNCT
fcis-5200	91	1	[	[	X
fcis-5200	91	2	3	3	X
fcis-5200	91	3	]	]	X
fcis-5200	91	4	zhang	zhang	PROPN
fcis-5200	91	5	y	y	PROPN
fcis-5200	91	6	,	,	PUNCT
fcis-5200	91	7	luo	luo	PROPN
fcis-5200	91	8	l	l	PROPN
fcis-5200	91	9	,	,	PUNCT
fcis-5200	91	10	ji	ji	PROPN
fcis-5200	91	11	x	x	PROPN
fcis-5200	91	12	,	,	PUNCT
fcis-5200	91	13	et	et	PROPN
fcis-5200	91	14	al.improved	al.improve	VERB
fcis-5200	91	15	random	random	ADJ
fcis-5200	91	16	forest	forest	NOUN
fcis-5200	91	17	algorithm	algorithm	NOUN
fcis-5200	91	18	based	base	VERB
fcis-5200	91	19	on	on	ADP
fcis-5200	91	20	decision	decision	NOUN
fcis-5200	91	21	paths	path	NOUN
fcis-5200	91	22	for	for	ADP
fcis-5200	91	23	fault	fault	NOUN
fcis-5200	91	24	diagnosis	diagnosis	NOUN
fcis-5200	91	25	of	of	ADP
fcis-5200	91	26	chemical	chemical	ADJ
fcis-5200	91	27	process	process	NOUN
fcis-5200	91	28	with	with	ADP
fcis-5200	91	29	incomplete	incomplete	ADJ
fcis-5200	91	30	data[j].sensors	data[j].sensor	NOUN
fcis-5200	91	31	,	,	PUNCT
fcis-5200	91	32	2021	2021	NUM
fcis-5200	91	33	,	,	PUNCT
fcis-5200	91	34	21	21	NUM
fcis-5200	91	35	.	.	PUNCT
fcis-5200	92	1	[	[	X
fcis-5200	92	2	4	4	X
fcis-5200	92	3	]	]	X
fcis-5200	92	4	adhikari	adhikari	PROPN
fcis-5200	92	5	d	d	PROPN
fcis-5200	92	6	,	,	PUNCT
fcis-5200	92	7	jiang	jiang	PROPN
fcis-5200	92	8	w	w	PROPN
fcis-5200	92	9	,	,	PUNCT
fcis-5200	92	10	zhan	zhan	PROPN
fcis-5200	92	11	j.imputation	j.imputation	NOUN
fcis-5200	92	12	using	use	VERB
fcis-5200	92	13	information	information	NOUN
fcis-5200	92	14	fusion	fusion	NOUN
fcis-5200	92	15	technique	technique	NOUN
fcis-5200	92	16	for	for	ADP
fcis-5200	92	17	sensor	sensor	NOUN
fcis-5200	92	18	generated	generate	VERB
fcis-5200	92	19	incomplete	incomplete	ADJ
fcis-5200	92	20	data	datum	NOUN
fcis-5200	92	21	with	with	ADP
fcis-5200	92	22	high	high	ADJ
fcis-5200	92	23	missing	miss	VERB
fcis-5200	92	24	gap[j].microprocessors	gap[j].microprocessor	NOUN
fcis-5200	92	25	and	and	CCONJ
fcis-5200	92	26	microsystems	microsystem	NOUN
fcis-5200	92	27	,	,	PUNCT
fcis-5200	92	28	2021:103636	2021:103636	NUM
fcis-5200	92	29	.	.	PUNCT
fcis-5200	93	1	[	[	X
fcis-5200	93	2	5	5	X
fcis-5200	93	3	]	]	X
fcis-5200	93	4	lai	lai	PROPN
fcis-5200	93	5	x	x	PROPN
fcis-5200	93	6	,	,	PUNCT
fcis-5200	93	7	wu	wu	PROPN
fcis-5200	93	8	x	x	PROPN
fcis-5200	93	9	,	,	PUNCT
fcis-5200	93	10	zhang	zhang	PROPN
fcis-5200	93	11	l.autoencoder	l.autoencoder	ADV
fcis-5200	93	12	-	-	PUNCT
fcis-5200	93	13	based	base	VERB
fcis-5200	93	14	multi	multi	ADJ
fcis-5200	93	15	-	-	NOUN
fcis-5200	93	16	task	task	ADJ
fcis-5200	93	17	learning	learning	NOUN
fcis-5200	93	18	for	for	ADP
fcis-5200	93	19	imputation	imputation	NOUN
fcis-5200	93	20	and	and	CCONJ
fcis-5200	93	21	classification	classification	NOUN
fcis-5200	93	22	of	of	ADP
fcis-5200	93	23	incomplete	incomplete	ADJ
fcis-5200	93	24	data[j].applied	data[j].applied	ADJ
fcis-5200	93	25	soft	soft	ADJ
fcis-5200	93	26	computing	computing	NOUN
fcis-5200	93	27	,	,	PUNCT
fcis-5200	93	28	2020	2020	NUM
fcis-5200	93	29	,	,	PUNCT
fcis-5200	93	30	98:106838	98:106838	ADJ
fcis-5200	93	31	.	.	PUNCT
fcis-5200	94	1	[	[	X
fcis-5200	94	2	6	6	NUM
fcis-5200	94	3	]	]	SYM
fcis-5200	94	4	li	li	PROPN
fcis-5200	94	5	h	h	PROPN
fcis-5200	94	6	,	,	PUNCT
fcis-5200	94	7	liu	liu	PROPN
fcis-5200	94	8	z	z	PROPN
fcis-5200	94	9	,	,	PUNCT
fcis-5200	94	10	zhu	zhu	PROPN
fcis-5200	94	11	p.an	p.an	ADJ
fcis-5200	94	12	engineering	engineering	NOUN
fcis-5200	94	13	domain	domain	NOUN
fcis-5200	94	14	knowledge	knowledge	NOUN
fcis-5200	94	15	-	-	PUNCT
fcis-5200	94	16	based	base	VERB
fcis-5200	94	17	framework	framework	NOUN
fcis-5200	94	18	for	for	ADP
fcis-5200	94	19	modelling	model	VERB
fcis-5200	94	20	highly	highly	ADV
fcis-5200	94	21	incomplete	incomplete	ADJ
fcis-5200	94	22	industrial	industrial	ADJ
fcis-5200	94	23	data[j].international	data[j].international	ADJ
fcis-5200	94	24	journal	journal	NOUN
fcis-5200	94	25	of	of	ADP
fcis-5200	94	26	data	datum	NOUN
fcis-5200	94	27	warehousing	warehousing	NOUN
fcis-5200	94	28	and	and	CCONJ
fcis-5200	94	29	mining	mining	NOUN
fcis-5200	94	30	(	(	PUNCT
fcis-5200	94	31	ijdwm	ijdwm	NOUN
fcis-5200	94	32	)	)	PUNCT
fcis-5200	94	33	,	,	PUNCT
fcis-5200	94	34	2021	2021	NUM
fcis-5200	94	35	,	,	PUNCT
fcis-5200	94	36	17	17	NUM
fcis-5200	94	37	.	.	PUNCT
fcis-5200	95	1	[	[	X
fcis-5200	95	2	7	7	X
fcis-5200	95	3	]	]	X
fcis-5200	95	4	peng	peng	PROPN
fcis-5200	95	5	c	c	PROPN
fcis-5200	95	6	,	,	PUNCT
fcis-5200	95	7	cai	cai	PROPN
fcis-5200	95	8	y	y	PROPN
fcis-5200	95	9	,	,	PUNCT
fcis-5200	95	10	liu	liu	PROPN
fcis-5200	95	11	g	g	PROPN
fcis-5200	95	12	,	,	PUNCT
fcis-5200	95	13	et	et	PROPN
fcis-5200	95	14	al.developing	al.develope	VERB
fcis-5200	95	15	a	a	DET
fcis-5200	95	16	reliability	reliability	NOUN
fcis-5200	95	17	model	model	NOUN
fcis-5200	95	18	of	of	ADP
fcis-5200	95	19	cnc	cnc	ADJ
fcis-5200	95	20	system	system	NOUN
fcis-5200	95	21	under	under	ADP
fcis-5200	95	22	limited	limited	ADJ
fcis-5200	95	23	sample	sample	NOUN
fcis-5200	95	24	data	datum	NOUN
fcis-5200	95	25	based	base	VERB
fcis-5200	95	26	on	on	ADP
fcis-5200	95	27	multisource	multisource	ADJ
fcis-5200	95	28	information	information	NOUN
fcis-5200	95	29	fusion[j].mathematical	fusion[j].mathematical	PROPN
fcis-5200	95	30	problems	problem	NOUN
fcis-5200	95	31	in	in	ADP
fcis-5200	95	32	engineering	engineering	NOUN
fcis-5200	95	33	,	,	PUNCT
fcis-5200	95	34	2020	2020	NUM
fcis-5200	95	35	.	.	PUNCT
fcis-5200	96	1	[	[	X
fcis-5200	96	2	8	8	NUM
fcis-5200	96	3	]	]	X
fcis-5200	96	4	wang	wang	PROPN
fcis-5200	96	5	b	b	PROPN
fcis-5200	96	6	,	,	PUNCT
fcis-5200	96	7	liu	liu	PROPN
fcis-5200	96	8	s	s	PROPN
fcis-5200	96	9	,	,	PUNCT
fcis-5200	96	10	gu	gu	NOUN
fcis-5200	96	11	d	d	NOUN
fcis-5200	96	12	.intelligent	.intelligent	NOUN
fcis-5200	96	13	chatter	chatter	NOUN
fcis-5200	96	14	detection	detection	NOUN
fcis-5200	96	15	for	for	ADP
fcis-5200	96	16	cnc	cnc	NOUN
fcis-5200	96	17	machine	machine	NOUN
fcis-5200	96	18	based	base	VERB
fcis-5200	96	19	on	on	ADP
fcis-5200	96	20	rfe	rfe	PROPN
fcis-5200	96	21	multi	multi	ADJ
fcis-5200	96	22	-	-	ADJ
fcis-5200	96	23	feature	feature	ADJ
fcis-5200	96	24	selection	selection	NOUN
fcis-5200	96	25	strategy	strategy	NOUN
fcis-5200	96	26	[	[	X
fcis-5200	96	27	j].measurement	j].measurement	ADJ
fcis-5200	96	28	science	science	NOUN
fcis-5200	96	29	and	and	CCONJ
fcis-5200	96	30	technology	technology	NOUN
fcis-5200	96	31	,	,	PUNCT
fcis-5200	96	32	2021	2021	NUM
fcis-5200	96	33	,	,	PUNCT
fcis-5200	96	34	32(9):095904	32(9):095904	NUM
fcis-5200	96	35	(	(	PUNCT
fcis-5200	96	36	20pp	20pp	NOUN
fcis-5200	96	37	)	)	PUNCT
fcis-5200	96	38	.	.	PUNCT
fcis-5200	97	1	[	[	X
fcis-5200	97	2	9	9	NUM
fcis-5200	97	3	]	]	PUNCT
fcis-5200	97	4	pan	pan	PROPN
fcis-5200	97	5	j	j	PROPN
fcis-5200	97	6	,	,	PUNCT
fcis-5200	97	7	li	li	PROPN
fcis-5200	97	8	c	c	PROPN
fcis-5200	97	9	,	,	PUNCT
fcis-5200	97	10	tang	tang	PROPN
fcis-5200	97	11	y	y	PROPN
fcis-5200	97	12	,	,	PUNCT
fcis-5200	97	13	et	et	PROPN
fcis-5200	97	14	al	al	PROPN
fcis-5200	97	15	.	.	PUNCT
fcis-5200	97	16	energy	energy	NOUN
fcis-5200	97	17	consumption	consumption	NOUN
fcis-5200	97	18	prediction	prediction	NOUN
fcis-5200	97	19	of	of	ADP
fcis-5200	97	20	a	a	DET
fcis-5200	97	21	cnc	cnc	ADJ
fcis-5200	97	22	machining	machining	NOUN
fcis-5200	97	23	process	process	NOUN
fcis-5200	97	24	with	with	ADP
fcis-5200	97	25	incomplete	incomplete	ADJ
fcis-5200	97	26	data[j	data[j	NOUN
fcis-5200	97	27	]	]	X
fcis-5200	97	28	.	.	PUNCT
fcis-5200	98	1	journal	journal	PROPN
fcis-5200	98	2	of	of	ADP
fcis-5200	98	3	automation	automation	NOUN
fcis-5200	98	4	(	(	PUNCT
fcis-5200	98	5	english	english	ADJ
fcis-5200	98	6	version	version	NOUN
fcis-5200	98	7	)	)	PUNCT
fcis-5200	98	8	,	,	PUNCT
fcis-5200	98	9	2022,8	2022,8	NUM
fcis-5200	98	10	(	(	PUNCT
fcis-5200	98	11	5	5	NUM
fcis-5200	98	12	):	):	PUNCT
fcis-5200	98	13	987	987	NUM
fcis-5200	98	14	-	-	SYM
fcis-5200	98	15	1000	1000	NUM
fcis-5200	98	16	.	.	PUNCT
fcis-5200	99	1	[	[	X
fcis-5200	99	2	10	10	NUM
fcis-5200	99	3	]	]	X
fcis-5200	99	4	li	li	PROPN
fcis-5200	99	5	s	s	PROPN
fcis-5200	99	6	,	,	PUNCT
fcis-5200	99	7	yang	yang	PROPN
fcis-5200	99	8	z	z	PROPN
fcis-5200	99	9	,	,	PUNCT
fcis-5200	99	10	tian	tian	ADJ
fcis-5200	99	11	h	h	NOUN
fcis-5200	99	12	,	,	PUNCT
fcis-5200	99	13	et	et	PROPN
fcis-5200	99	14	al	al	PROPN
fcis-5200	99	15	.	.	PROPN
fcis-5200	100	1	failure	failure	NOUN
fcis-5200	100	2	analysis	analysis	NOUN
fcis-5200	100	3	for	for	ADP
fcis-5200	100	4	hydraulic	hydraulic	ADJ
fcis-5200	100	5	system	system	NOUN
fcis-5200	100	6	of	of	ADP
fcis-5200	100	7	heavy	heavy	ADJ
fcis-5200	100	8	-	-	PUNCT
fcis-5200	100	9	duty	duty	NOUN
fcis-5200	100	10	machine	machine	NOUN
fcis-5200	100	11	tool	tool	NOUN
fcis-5200	100	12	with	with	ADP
fcis-5200	100	13	incomplete	incomplete	ADJ
fcis-5200	100	14	failure	failure	NOUN
fcis-5200	100	15	data[j].appl.sci.2021	data[j].appl.sci.2021	NOUN
fcis-5200	100	16	,	,	PUNCT
fcis-5200	100	17	11(3	11(3	NUM
fcis-5200	100	18	)	)	PUNCT
fcis-5200	100	19	,	,	PUNCT
fcis-5200	100	20	1249	1249	NUM
fcis-5200	100	21	.	.	PUNCT
fcis-5200	101	1	[	[	X
fcis-5200	101	2	11	11	NUM
fcis-5200	101	3	]	]	X
fcis-5200	101	4	guo	guo	PROPN
fcis-5200	101	5	c	c	PROPN
fcis-5200	101	6	,	,	PUNCT
fcis-5200	101	7	hu	hu	PROPN
fcis-5200	101	8	w	w	PROPN
fcis-5200	101	9	,	,	PUNCT
fcis-5200	101	10	yang	yang	PROPN
fcis-5200	101	11	f	f	PROPN
fcis-5200	101	12	,	,	PUNCT
fcis-5200	101	13	et	et	PROPN
fcis-5200	101	14	al	al	PROPN
fcis-5200	101	15	.	.	PUNCT
fcis-5200	102	1	deep	deep	ADJ
fcis-5200	102	2	learning	learning	NOUN
fcis-5200	102	3	technique	technique	NOUN
fcis-5200	102	4	for	for	ADP
fcis-5200	102	5	process	process	NOUN
fcis-5200	102	6	fault	fault	NOUN
fcis-5200	102	7	detection	detection	NOUN
fcis-5200	102	8	and	and	CCONJ
fcis-5200	102	9	diagnosis	diagnosis	NOUN
fcis-5200	102	10	in	in	ADP
fcis-5200	102	11	the	the	DET
fcis-5200	102	12	presence	presence	NOUN
fcis-5200	102	13	of	of	ADP
fcis-5200	102	14	incomplete	incomplete	ADJ
fcis-5200	102	15	data[j	data[j	NOUN
fcis-5200	102	16	]	]	X
fcis-5200	102	17	.	.	PUNCT
fcis-5200	103	1	chinese	chinese	ADJ
fcis-5200	103	2	journal	journal	PROPN
fcis-5200	103	3	of	of	ADP
fcis-5200	103	4	chemical	chemical	PROPN
fcis-5200	103	5	engineering	engineering	NOUN
fcis-5200	103	6	:	:	PUNCT
fcis-5200	103	7	english	english	PROPN
fcis-5200	103	8	edition	edition	NOUN
fcis-5200	103	9	,	,	PUNCT
fcis-5200	103	10	2020	2020	NUM
fcis-5200	103	11	.	.	PUNCT
fcis-5200	104	1	[	[	X
fcis-5200	104	2	12	12	NUM
fcis-5200	104	3	]	]	X
fcis-5200	104	4	jiang	jiang	PROPN
fcis-5200	104	5	w.	w.	PROPN
fcis-5200	104	6	research	research	PROPN
fcis-5200	104	7	on	on	ADP
fcis-5200	104	8	error	error	NOUN
fcis-5200	104	9	monitoring	monitoring	NOUN
fcis-5200	104	10	model	model	NOUN
fcis-5200	104	11	of	of	ADP
fcis-5200	104	12	cnc	cnc	PROPN
fcis-5200	104	13	machine	machine	NOUN
fcis-5200	104	14	tool	tool	NOUN
fcis-5200	104	15	based	base	VERB
fcis-5200	104	16	on	on	ADP
fcis-5200	104	17	artificial	artificial	ADJ
fcis-5200	104	18	intelligence[j].journal	intelligence[j].journal	PROPN
fcis-5200	104	19	of	of	ADP
fcis-5200	104	20	physics	physics	PROPN
fcis-5200	104	21	conference	conference	NOUN
fcis-5200	104	22	series	series	PROPN
fcis-5200	104	23	,	,	PUNCT
fcis-5200	104	24	2020	2020	NUM
fcis-5200	104	25	,	,	PUNCT
fcis-5200	104	26	1574:012125	1574:012125	NUM
fcis-5200	104	27	.	.	PUNCT
fcis-5200	105	1	[	[	X
fcis-5200	105	2	13	13	NUM
fcis-5200	105	3	]	]	X
fcis-5200	105	4	dzaferagic	dzaferagic	PROPN
fcis-5200	105	5	m	m	PROPN
fcis-5200	105	6	,	,	PUNCT
fcis-5200	105	7	marchetti	marchetti	PROPN
fcis-5200	105	8	n	n	CCONJ
fcis-5200	105	9	,	,	PUNCT
fcis-5200	105	10	macaluso	macaluso	NOUN
fcis-5200	105	11	i.fault	i.fault	NOUN
fcis-5200	105	12	detection	detection	NOUN
fcis-5200	105	13	and	and	CCONJ
fcis-5200	105	14	classification	classification	NOUN
fcis-5200	105	15	in	in	ADP
fcis-5200	105	16	industrial	industrial	ADJ
fcis-5200	105	17	iot	iot	NOUN
fcis-5200	105	18	in	in	ADP
fcis-5200	105	19	case	case	NOUN
fcis-5200	105	20	of	of	ADP
fcis-5200	105	21	missing	miss	VERB
fcis-5200	105	22	sensor	sensor	NOUN
fcis-5200	105	23	data.2021	data.2021	PROPN
fcis-5200	105	24	.	.	PUNCT
fcis-5200	105	25	doi:10.36227	doi:10.36227	PROPN
fcis-5200	105	26	/	/	SYM
fcis-5200	105	27	techrxiv.14540061	techrxiv.14540061	PROPN
fcis-5200	105	28	.	.	PUNCT
fcis-5200	106	1	[	[	X
fcis-5200	106	2	14	14	NUM
fcis-5200	106	3	]	]	X
fcis-5200	106	4	khan	khan	PROPN
fcis-5200	106	5	s	s	PROPN
fcis-5200	106	6	,	,	PUNCT
fcis-5200	106	7	lorenzelli	lorenzelli	ADJ
fcis-5200	106	8	l	l	NOUN
fcis-5200	106	9	,	,	PUNCT
fcis-5200	106	10	dahiya	dahiya	PROPN
fcis-5200	106	11	r.flexible	r.flexible	ADJ
fcis-5200	106	12	misfet	misfet	NOUN
fcis-5200	106	13	devices	device	NOUN
fcis-5200	106	14	from	from	ADP
fcis-5200	106	15	transfer	transfer	NOUN
fcis-5200	106	16	printed	print	VERB
fcis-5200	106	17	si	si	PROPN
fcis-5200	106	18	microwires	microwire	NOUN
fcis-5200	106	19	and	and	CCONJ
fcis-5200	106	20	spray	spray	VERB
fcis-5200	106	21	coating[j].ieee	coating[j].ieee	PROPN
fcis-5200	106	22	journal	journal	NOUN
fcis-5200	106	23	of	of	ADP
fcis-5200	106	24	the	the	DET
fcis-5200	106	25	electron	electron	NOUN
fcis-5200	106	26	devices	device	NOUN
fcis-5200	106	27	society	society	NOUN
fcis-5200	106	28	,	,	PUNCT
fcis-5200	106	29	2019	2019	NUM
fcis-5200	106	30	,	,	PUNCT
fcis-5200	106	31	4(4):189	4(4):189	NUM
fcis-5200	106	32	-	-	SYM
fcis-5200	106	33	196	196	NUM
fcis-5200	106	34	.	.	NOUN
fcis-5200	106	35	8	8	NUM
fcis-5200	107	1	[	[	SYM
fcis-5200	107	2	15	15	NUM
fcis-5200	107	3	]	]	X
fcis-5200	107	4	tian	tian	ADJ
fcis-5200	107	5	,	,	PUNCT
fcis-5200	107	6	lihui	lihui	PROPN
fcis-5200	107	7	,	,	PUNCT
fcis-5200	107	8	feng	feng	PROPN
fcis-5200	107	9	,	,	PUNCT
fcis-5200	107	10	et	et	PROPN
fcis-5200	107	11	al.microstructure	al.microstructure	NOUN
fcis-5200	107	12	,	,	PUNCT
fcis-5200	107	13	microhardness	microhardness	ADJ
fcis-5200	107	14	,	,	PUNCT
fcis-5200	107	15	and	and	CCONJ
fcis-5200	107	16	wear	wear	VERB
fcis-5200	107	17	resistance	resistance	NOUN
fcis-5200	107	18	of	of	ADP
fcis-5200	107	19	alcocrfeniti	alcocrfeniti	PROPN
fcis-5200	107	20	/	/	SYM
fcis-5200	107	21	ni60	ni60	PROPN
fcis-5200	107	22	coating	coat	VERB
fcis-5200	107	23	by	by	ADP
fcis-5200	107	24	plasma	plasma	NOUN
fcis-5200	107	25	spraying[j].coatings	spraying[j].coating	NOUN
fcis-5200	107	26	,	,	PUNCT
fcis-5200	107	27	2018	2018	NUM
fcis-5200	107	28	.	.	PUNCT
fcis-5200	108	1	[	[	X
fcis-5200	108	2	16	16	NUM
fcis-5200	108	3	]	]	PUNCT
fcis-5200	108	4	xu	xu	PROPN
fcis-5200	108	5	x	x	X
fcis-5200	108	6	,	,	PUNCT
fcis-5200	109	1	yi	yi	PROPN
fcis-5200	109	2	d	d	PROPN
fcis-5200	109	3	,	,	PUNCT
fcis-5200	109	4	wang	wang	PROPN
fcis-5200	109	5	z	z	PROPN
fcis-5200	109	6	,	,	PUNCT
fcis-5200	109	7	et	et	NOUN
fcis-5200	109	8	al.greatly	al.greatly	ADV
fcis-5200	109	9	enhanced	enhance	VERB
fcis-5200	109	10	anticorrosion	anticorrosion	NOUN
fcis-5200	109	11	of	of	ADP
fcis-5200	109	12	cu	cu	PROPN
fcis-5200	109	13	by	by	ADP
fcis-5200	109	14	commensurate	commensurate	ADJ
fcis-5200	109	15	graphene	graphene	NOUN
fcis-5200	109	16	coating[j].advanced	coating[j].advance	VERB
fcis-5200	109	17	materials	material	NOUN
fcis-5200	109	18	,	,	PUNCT
fcis-5200	109	19	2018	2018	NUM
fcis-5200	109	20	,	,	PUNCT
fcis-5200	109	21	30(6):1702944	30(6):1702944	NUM
fcis-5200	109	22	.	.	PUNCT
fcis-5200	110	1	[	[	X
fcis-5200	110	2	17	17	NUM
fcis-5200	110	3	]	]	X
fcis-5200	110	4	luo	luo	PROPN
fcis-5200	110	5	songsong	songsong	PROPN
fcis-5200	110	6	.	.	PUNCT
fcis-5200	111	1	design	design	NOUN
fcis-5200	111	2	and	and	CCONJ
fcis-5200	111	3	analysis	analysis	NOUN
fcis-5200	111	4	of	of	ADP
fcis-5200	111	5	leak	leak	NOUN
fcis-5200	111	6	detection	detection	NOUN
fcis-5200	111	7	system	system	NOUN
fcis-5200	111	8	of	of	ADP
fcis-5200	111	9	vacuum	vacuum	NOUN
fcis-5200	111	10	coating	coating	NOUN
fcis-5200	111	11	equipment	equipment	NOUN
fcis-5200	111	12	[	[	X
fcis-5200	111	13	j	j	X
fcis-5200	111	14	]	]	X
fcis-5200	111	15	.	.	PUNCT
fcis-5200	112	1	china	china	PROPN
fcis-5200	112	2	glass	glass	PROPN
fcis-5200	112	3	,	,	PUNCT
fcis-5200	112	4	2017	2017	NUM
fcis-5200	112	5	(	(	PUNCT
fcis-5200	112	6	42	42	NUM
fcis-5200	112	7	):	):	PUNCT
fcis-5200	112	8	7	7	NUM
fcis-5200	112	9	-	-	SYM
fcis-5200	112	10	10	10	NUM
fcis-5200	112	11	.	.	PUNCT
fcis-5200	113	1	[	[	X
fcis-5200	113	2	18	18	NUM
fcis-5200	113	3	]	]	X
fcis-5200	113	4	dai	dai	PROPN
fcis-5200	113	5	mingjiang	mingjiang	PROPN
fcis-5200	113	6	,	,	PUNCT
fcis-5200	113	7	lin	lin	PROPN
fcis-5200	113	8	kaisheng	kaisheng	PROPN
fcis-5200	113	9	,	,	PUNCT
fcis-5200	113	10	tian	tian	PROPN
fcis-5200	113	11	junrui	junrui	PROPN
fcis-5200	113	12	,	,	PUNCT
fcis-5200	113	13	et	et	PROPN
fcis-5200	113	14	al	al	PROPN
fcis-5200	113	15	.	.	PROPN
fcis-5200	113	16	complete	complete	PROPN
fcis-5200	113	17	set	set	NOUN
fcis-5200	113	18	of	of	ADP
fcis-5200	113	19	equipment	equipment	NOUN
fcis-5200	113	20	,	,	PUNCT
fcis-5200	113	21	process	process	NOUN
fcis-5200	113	22	and	and	CCONJ
fcis-5200	113	23	application	application	NOUN
fcis-5200	113	24	of	of	ADP
fcis-5200	113	25	ion	ion	NOUN
fcis-5200	113	26	source	source	NOUN
fcis-5200	113	27	composite	composite	ADJ
fcis-5200	113	28	vacuum	vacuum	NOUN
fcis-5200	113	29	coating	coating	NOUN
fcis-5200	114	1	[	[	X
fcis-5200	114	2	j	j	X
fcis-5200	114	3	]	]	X
fcis-5200	114	4	.	.	PUNCT
fcis-5200	115	1	china	china	PROPN
fcis-5200	115	2	,	,	PUNCT
fcis-5200	115	3	2015,000	2015,000	NUM
fcis-5200	115	4	(	(	PUNCT
fcis-5200	115	5	010	010	NUM
fcis-5200	115	6	):	):	PUNCT
fcis-5200	115	7	46	46	NUM
fcis-5200	115	8	-	-	SYM
fcis-5200	115	9	47	47	NUM
fcis-5200	115	10	.	.	PUNCT
fcis-5200	116	1	[	[	X
fcis-5200	116	2	19	19	NUM
fcis-5200	116	3	]	]	X
fcis-5200	116	4	wang	wang	PROPN
fcis-5200	116	5	yubo	yubo	PROPN
fcis-5200	116	6	,	,	PUNCT
fcis-5200	116	7	li	li	PROPN
fcis-5200	116	8	yulong	yulong	PROPN
fcis-5200	116	9	,	,	PUNCT
fcis-5200	116	10	wang	wang	PROPN
fcis-5200	116	11	wenqin	wenqin	PROPN
fcis-5200	116	12	,	,	PUNCT
fcis-5200	116	13	et	et	PROPN
fcis-5200	116	14	al	al	PROPN
fcis-5200	116	15	.	.	PUNCT
fcis-5200	117	1	the	the	DET
fcis-5200	117	2	ent	ent	PROPN
fcis-5200	117	3	stress	stress	NOUN
fcis-5200	117	4	monitoring	monitoring	NOUN
fcis-5200	117	5	of	of	ADP
fcis-5200	117	6	chemical	chemical	NOUN
fcis-5200	117	7	coating	coating	NOUN
fcis-5200	117	8	process	process	NOUN
fcis-5200	117	9	based	base	VERB
fcis-5200	117	10	on	on	ADP
fcis-5200	117	11	fiber	fiber	NOUN
fcis-5200	117	12	grating	grating	AUX
fcis-5200	117	13	sensing	sense	VERB
fcis-5200	117	14	[	[	X
fcis-5200	117	15	j	j	X
fcis-5200	117	16	]	]	X
fcis-5200	117	17	.	.	PUNCT
fcis-5200	118	1	journal	journal	PROPN
fcis-5200	118	2	of	of	ADP
fcis-5200	118	3	photonics	photonic	NOUN
fcis-5200	118	4	,	,	PUNCT
fcis-5200	118	5	2016,45	2016,45	NUM
fcis-5200	118	6	(	(	PUNCT
fcis-5200	118	7	008	008	NUM
fcis-5200	118	8	):	):	PUNCT
fcis-5200	118	9	70	70	NUM
fcis-5200	118	10	-	-	SYM
fcis-5200	118	11	74	74	NUM
fcis-5200	118	12	.	.	PUNCT