id	sid	eid	entity	type
ffhd-48	1	1	2160-3855	CARDINAL
ffhd-48	1	2	issn	PERSON
ffhd-48	1	3	2378-7007	DATE
ffhd-48	1	4	2160-3855	CARDINAL
ffhd-48	1	5	issn	PERSON
ffhd-48	1	6	2378-7007	DATE
ffhd-48	2	1	3	CARDINAL
ffhd-48	3	1	2013	DATE
ffhd-48	3	2	july 2013	DATE
ffhd-48	3	3	30	CARDINAL
ffhd-48	3	4	ossipee rd	GPE
ffhd-48	3	5	newton	GPE
ffhd-48	3	6	ma	PERSON
ffhd-48	3	7	02464	DATE
ffhd-48	4	1	robert j. fisher	PERSON
ffhd-48	4	2	2massachusetts	CARDINAL
ffhd-48	4	3	institute of technology	ORG
ffhd-48	4	4	chemical engineering department	ORG
ffhd-48	4	5	bldg 66	ORG
ffhd-48	4	6	305	CARDINAL
ffhd-48	4	7	77	CARDINAL
ffhd-48	4	8	massachusetts avenue	GPE
ffhd-48	4	9	cambridge	GPE
ffhd-48	4	10	02139-4307	DATE
ffhd-48	19	1	less than 100	CARDINAL
ffhd-48	22	1	12	CARDINAL
ffhd-48	23	1	119	CARDINAL
ffhd-48	23	2	larger than 1 micron	QUANTITY
ffhd-48	26	1	four	CARDINAL
ffhd-48	27	1	200	CARDINAL
ffhd-48	27	2	about 5 microns	QUANTITY
ffhd-48	30	1	150 microns	QUANTITY
ffhd-48	30	2	99%	PERCENT
ffhd-48	30	3	smaller than 15 microns	QUANTITY
ffhd-48	30	4	10 microns	QUANTITY
ffhd-48	30	5	about 200	CARDINAL
ffhd-48	31	1	300-500	CARDINAL
ffhd-48	37	1	2013-07-08	DATE
ffhd-48	37	2	3	CARDINAL
ffhd-48	38	1	2013	DATE
ffhd-48	38	2	july 2013	DATE
ffhd-48	38	3	ffc	ORG
ffhd-48	38	4	first	ORDINAL
ffhd-48	38	5	4.0	CARDINAL