id	sid	eid	entity	type
ffhd-980	1	1	2160-3855	CARDINAL
ffhd-980	1	2	issn	PERSON
ffhd-980	1	3	2378-7007	DATE
ffhd-980	1	4	2160-3855	CARDINAL
ffhd-980	1	5	issn	PERSON
ffhd-980	1	6	2378-7007	DATE
ffhd-980	2	1	12 no. 9	CARDINAL
ffhd-980	2	2	2022	CARDINAL
ffhd-980	2	3	2022	CARDINAL
ffhd-980	2	4	kaewsedam n	PERSON
ffhd-980	5	1	three	CARDINAL
ffhd-980	5	2	0%	PERCENT
ffhd-980	5	3	2%	PERCENT
ffhd-980	5	4	8%	PERCENT
ffhd-980	7	1	0.22 μm	QUANTITY
ffhd-980	8	1	48h	DATE
ffhd-980	9	1	5.03%	PERCENT
ffhd-980	9	2	17.53%	PERCENT
ffhd-980	9	3	24 hours	TIME
ffhd-980	10	1	3,4	CARDINAL
ffhd-980	14	1	2022	CARDINAL
ffhd-980	15	1	12 no. 9	CARDINAL
ffhd-980	15	2	2022	CARDINAL
ffhd-980	15	3	2022	CARDINAL
ffhd-980	15	4	ffc	ORG
ffhd-980	15	5	first	ORDINAL
ffhd-980	15	6	4.0	CARDINAL