id	sid	tid	token	lemma	pos
futech-534	1	1	ka	ka	PROPN
futech-534	1	2	.	.	PROPN
futech-534	1	3	kumar	kumar	PROPN
futech-534	1	4	&	&	CCONJ
futech-534	1	5	k.	k.	PROPN
futech-534	1	6	hemachandran	hemachandran	PROPN
futech-534	1	7	/	/	SYM
futech-534	1	8	future	future	ADJ
futech-534	1	9	technology	technology	NOUN
futech-534	1	10	february	february	PROPN
futech-534	1	11	2026|	2026|	NUM
futech-534	1	12	volume	volume	NOUN
futech-534	1	13	05	05	NUM
futech-534	2	1	|	|	ADV
futech-534	2	2	issue	issue	NOUN
futech-534	2	3	01	01	NUM
futech-534	3	1	|	|	ADV
futech-534	3	2	pages	page	VERB
futech-534	3	3	55	55	NUM
futech-534	3	4	-	-	SYM
futech-534	3	5	64	64	NUM
futech-534	3	6	55	55	NUM
futech-534	3	7	article	article	NOUN
futech-534	3	8	optimized	optimize	VERB
futech-534	3	9	cycle	cycle	NOUN
futech-534	3	10	time	time	NOUN
futech-534	3	11	forecasting	forecasting	NOUN
futech-534	3	12	in	in	ADP
futech-534	3	13	semiconductor	semiconductor	NOUN
futech-534	3	14	wafer	wafer	NOUN
futech-534	3	15	fabrication	fabrication	NOUN
futech-534	3	16	via	via	ADP
futech-534	3	17	hierarchical	hierarchical	ADJ
futech-534	3	18	transfer	transfer	NOUN
futech-534	3	19	learning	learning	NOUN
futech-534	3	20	and	and	CCONJ
futech-534	3	21	hyperparameter	hyperparameter	NOUN
futech-534	3	22	optimization	optimization	NOUN
futech-534	3	23	kanaparthi	kanaparthi	PROPN
futech-534	3	24	anil	anil	PROPN
futech-534	3	25	kumar	kumar	PROPN
futech-534	3	26	*	*	PROPN
futech-534	3	27	,	,	PUNCT
futech-534	3	28	k.	k.	PROPN
futech-534	3	29	hemachandran	hemachandran	VERB
futech-534	3	30	woxsen	woxsen	PROPN
futech-534	3	31	university	university	PROPN
futech-534	3	32	,	,	PUNCT
futech-534	3	33	kamkole	kamkole	NOUN
futech-534	3	34	,	,	PUNCT
futech-534	3	35	sadasivpet	sadasivpet	NOUN
futech-534	3	36	,	,	PUNCT
futech-534	3	37	sangareddy	sangareddy	NOUN
futech-534	3	38	district	district	PROPN
futech-534	3	39	,	,	PUNCT
futech-534	3	40	hyderabad	hyderabad	PROPN
futech-534	3	41	,	,	PUNCT
futech-534	3	42	telangana	telangana	PROPN
futech-534	3	43	502345	502345	NUM
futech-534	3	44	,	,	PUNCT
futech-534	4	1	india	india	PROPN
futech-534	4	2	a	a	DET
futech-534	4	3	r	r	NOUN
futech-534	4	4	t	t	NOUN
futech-534	5	1	i	i	PRON
futech-534	5	2	c	c	NOUN
futech-534	5	3	l	l	NOUN
futech-534	5	4	e	e	NOUN
futech-534	6	1	i	i	PRON
futech-534	6	2	n	n	VERB
futech-534	6	3	f	f	NOUN
futech-534	6	4	o	o	NOUN
futech-534	6	5	article	article	NOUN
futech-534	6	6	history	history	NOUN
futech-534	6	7	:	:	PUNCT
futech-534	6	8	received	receive	VERB
futech-534	6	9	21	21	NUM
futech-534	6	10	august	august	PROPN
futech-534	6	11	2025	2025	NUM
futech-534	6	12	received	receive	VERB
futech-534	6	13	in	in	ADP
futech-534	6	14	revised	revise	VERB
futech-534	6	15	form	form	NOUN
futech-534	6	16	29	29	NUM
futech-534	6	17	september	september	PROPN
futech-534	6	18	2025	2025	NUM
futech-534	6	19	accepted	accept	VERB
futech-534	6	20	16	16	NUM
futech-534	6	21	october	october	PROPN
futech-534	6	22	2025	2025	NUM
futech-534	6	23	keywords	keyword	NOUN
futech-534	6	24	:	:	PUNCT
futech-534	6	25	cycle	cycle	NOUN
futech-534	6	26	-	-	PUNCT
futech-534	6	27	time	time	NOUN
futech-534	6	28	forecasting	forecasting	NOUN
futech-534	6	29	,	,	PUNCT
futech-534	6	30	semiconductor	semiconductor	NOUN
futech-534	6	31	manufacturing	manufacturing	NOUN
futech-534	6	32	,	,	PUNCT
futech-534	6	33	hierarchical	hierarchical	ADJ
futech-534	6	34	transfer	transfer	NOUN
futech-534	6	35	learning	learning	NOUN
futech-534	6	36	,	,	PUNCT
futech-534	6	37	bayesian	bayesian	NOUN
futech-534	6	38	optimization	optimization	NOUN
futech-534	6	39	,	,	PUNCT
futech-534	6	40	intelligent	intelligent	ADJ
futech-534	6	41	manufacturing	manufacturing	NOUN
futech-534	6	42	*	*	PUNCT
futech-534	6	43	corresponding	correspond	VERB
futech-534	6	44	author	author	NOUN
futech-534	6	45	email	email	NOUN
futech-534	6	46	address	address	NOUN
futech-534	6	47	:	:	PUNCT
futech-534	6	48	anilkds.85@gmail.com	anilkds.85@gmail.com	PROPN
futech-534	6	49	doi	doi	PROPN
futech-534	6	50	:	:	PUNCT
futech-534	6	51	10.55670	10.55670	NUM
futech-534	6	52	/	/	SYM
futech-534	6	53	fpll.futech.5.1.6	fpll.futech.5.1.6	PROPN
futech-534	6	54	a	a	PRON
futech-534	6	55	b	b	PROPN
futech-534	6	56	s	s	ADP
futech-534	6	57	t	t	PROPN
futech-534	6	58	r	r	NOUN
futech-534	6	59	a	a	DET
futech-534	6	60	c	c	NOUN
futech-534	6	61	t	t	NOUN
futech-534	6	62	accurate	accurate	ADJ
futech-534	6	63	cycle	cycle	NOUN
futech-534	6	64	-	-	PUNCT
futech-534	6	65	time	time	NOUN
futech-534	6	66	forecasting	forecasting	NOUN
futech-534	6	67	remains	remain	VERB
futech-534	6	68	a	a	DET
futech-534	6	69	persistent	persistent	ADJ
futech-534	6	70	challenge	challenge	NOUN
futech-534	6	71	in	in	ADP
futech-534	6	72	semiconductor	semiconductor	NOUN
futech-534	6	73	wafer	wafer	NOUN
futech-534	6	74	fabrication	fabrication	NOUN
futech-534	6	75	due	due	ADP
futech-534	6	76	to	to	ADP
futech-534	6	77	highly	highly	ADV
futech-534	6	78	dynamic	dynamic	ADJ
futech-534	6	79	,	,	PUNCT
futech-534	6	80	multivariate	multivariate	NOUN
futech-534	6	81	process	process	NOUN
futech-534	6	82	conditions	condition	NOUN
futech-534	6	83	.	.	PUNCT
futech-534	7	1	this	this	DET
futech-534	7	2	study	study	NOUN
futech-534	7	3	proposes	propose	VERB
futech-534	7	4	an	an	DET
futech-534	7	5	optimized	optimize	VERB
futech-534	7	6	hierarchical	hierarchical	ADJ
futech-534	7	7	transfer	transfer	NOUN
futech-534	7	8	learning	learn	VERB
futech-534	7	9	with	with	ADP
futech-534	7	10	hyperparameter	hyperparameter	NOUN
futech-534	7	11	optimization	optimization	NOUN
futech-534	7	12	(	(	PUNCT
futech-534	7	13	htl	htl	PROPN
futech-534	7	14	-	-	PUNCT
futech-534	7	15	hpo	hpo	PROPN
futech-534	7	16	)	)	PUNCT
futech-534	7	17	framework	framework	NOUN
futech-534	7	18	that	that	PRON
futech-534	7	19	integrates	integrate	VERB
futech-534	7	20	cross	cross	ADJ
futech-534	7	21	-	-	ADJ
futech-534	7	22	fab	fab	ADJ
futech-534	7	23	knowledge	knowledge	NOUN
futech-534	7	24	transfer	transfer	NOUN
futech-534	7	25	with	with	ADP
futech-534	7	26	bayesian	bayesian	NOUN
futech-534	7	27	tree	tree	NOUN
futech-534	7	28	-	-	PUNCT
futech-534	7	29	structured	structure	VERB
futech-534	7	30	parzen	parzen	NOUN
futech-534	7	31	estimator	estimator	NOUN
futech-534	7	32	–	–	PUNCT
futech-534	7	33	based	base	VERB
futech-534	7	34	optimization	optimization	NOUN
futech-534	7	35	to	to	PART
futech-534	7	36	improve	improve	VERB
futech-534	7	37	predictive	predictive	ADJ
futech-534	7	38	precision	precision	NOUN
futech-534	7	39	and	and	CCONJ
futech-534	7	40	generalization	generalization	NOUN
futech-534	7	41	.	.	PUNCT
futech-534	8	1	the	the	DET
futech-534	8	2	methodology	methodology	NOUN
futech-534	8	3	involves	involve	VERB
futech-534	8	4	hierarchical	hierarchical	ADJ
futech-534	8	5	pretraining	pretraine	VERB
futech-534	8	6	on	on	ADP
futech-534	8	7	source	source	NOUN
futech-534	8	8	fabs	fab	NOUN
futech-534	8	9	,	,	PUNCT
futech-534	8	10	maximum	maximum	ADJ
futech-534	8	11	-	-	PUNCT
futech-534	8	12	mean	mean	ADJ
futech-534	8	13	-	-	PUNCT
futech-534	8	14	discrepancy	discrepancy	NOUN
futech-534	8	15	–	–	PUNCT
futech-534	8	16	driven	drive	VERB
futech-534	8	17	domain	domain	NOUN
futech-534	8	18	alignment	alignment	NOUN
futech-534	8	19	,	,	PUNCT
futech-534	8	20	and	and	CCONJ
futech-534	8	21	probabilistic	probabilistic	ADJ
futech-534	8	22	hyperparameter	hyperparameter	NOUN
futech-534	8	23	tuning	tune	VERB
futech-534	8	24	for	for	ADP
futech-534	8	25	fine	fine	ADV
futech-534	8	26	-	-	PUNCT
futech-534	8	27	grained	grain	VERB
futech-534	8	28	adaptation	adaptation	NOUN
futech-534	8	29	to	to	PART
futech-534	8	30	target	target	VERB
futech-534	8	31	lines	line	NOUN
futech-534	8	32	.	.	PUNCT
futech-534	9	1	using	use	VERB
futech-534	9	2	a	a	DET
futech-534	9	3	real	real	ADJ
futech-534	9	4	industrial	industrial	ADJ
futech-534	9	5	multivariate	multivariate	NOUN
futech-534	9	6	dataset	dataset	NOUN
futech-534	9	7	,	,	PUNCT
futech-534	9	8	the	the	DET
futech-534	9	9	model	model	NOUN
futech-534	9	10	’s	’s	PART
futech-534	9	11	performance	performance	NOUN
futech-534	9	12	was	be	AUX
futech-534	9	13	benchmarked	benchmarke	VERB
futech-534	9	14	against	against	ADP
futech-534	9	15	established	establish	VERB
futech-534	9	16	baselines	baseline	NOUN
futech-534	9	17	—	—	PUNCT
futech-534	9	18	decision	decision	NOUN
futech-534	9	19	tree	tree	NOUN
futech-534	9	20	,	,	PUNCT
futech-534	9	21	gru	gru	NOUN
futech-534	9	22	,	,	PUNCT
futech-534	9	23	and	and	CCONJ
futech-534	9	24	lstm	lstm	ADJ
futech-534	9	25	—	—	PUNCT
futech-534	9	26	under	under	ADP
futech-534	9	27	consistent	consistent	ADJ
futech-534	9	28	experimental	experimental	ADJ
futech-534	9	29	protocols	protocol	NOUN
futech-534	9	30	.	.	PUNCT
futech-534	10	1	the	the	DET
futech-534	10	2	proposed	propose	VERB
futech-534	10	3	approach	approach	NOUN
futech-534	10	4	achieved	achieve	VERB
futech-534	10	5	the	the	DET
futech-534	10	6	lowest	low	ADJ
futech-534	10	7	forecasting	forecasting	NOUN
futech-534	10	8	error	error	NOUN
futech-534	10	9	(	(	PUNCT
futech-534	10	10	mse	mse	NOUN
futech-534	10	11	=	=	SYM
futech-534	10	12	0.006	0.006	NUM
futech-534	10	13	;	;	PUNCT
futech-534	10	14	rmse	rmse	NOUN
futech-534	10	15	=	=	PROPN
futech-534	10	16	0.079	0.079	NUM
futech-534	10	17	)	)	PUNCT
futech-534	10	18	and	and	CCONJ
futech-534	10	19	the	the	DET
futech-534	10	20	highest	high	ADJ
futech-534	10	21	explanatory	explanatory	ADJ
futech-534	10	22	power	power	NOUN
futech-534	10	23	(	(	PUNCT
futech-534	10	24	r²	r²	NOUN
futech-534	10	25	=	=	NOUN
futech-534	10	26	0.934	0.934	NUM
futech-534	10	27	;	;	PUNCT
futech-534	10	28	explained	explain	VERB
futech-534	10	29	variance	variance	NOUN
futech-534	10	30	=	=	PROPN
futech-534	10	31	0.938	0.938	NUM
futech-534	10	32	)	)	PUNCT
futech-534	10	33	,	,	PUNCT
futech-534	10	34	with	with	ADP
futech-534	10	35	paired	pair	VERB
futech-534	10	36	t	t	NOUN
futech-534	10	37	-	-	PUNCT
futech-534	10	38	tests	test	NOUN
futech-534	10	39	(	(	PUNCT
futech-534	10	40	p	p	X
futech-534	10	41	<	<	X
futech-534	10	42	0.05	0.05	NUM
futech-534	10	43	)	)	PUNCT
futech-534	10	44	confirming	confirm	VERB
futech-534	10	45	statistically	statistically	ADV
futech-534	10	46	significant	significant	ADJ
futech-534	10	47	gains	gain	NOUN
futech-534	10	48	.	.	PUNCT
futech-534	11	1	results	result	NOUN
futech-534	11	2	reveal	reveal	VERB
futech-534	11	3	that	that	SCONJ
futech-534	11	4	hierarchical	hierarchical	ADJ
futech-534	11	5	knowledge	knowledge	NOUN
futech-534	11	6	reuse	reuse	NOUN
futech-534	11	7	and	and	CCONJ
futech-534	11	8	bayesian	bayesian	NOUN
futech-534	11	9	optimization	optimization	NOUN
futech-534	11	10	jointly	jointly	ADV
futech-534	11	11	enhance	enhance	VERB
futech-534	11	12	model	model	NOUN
futech-534	11	13	stability	stability	NOUN
futech-534	11	14	,	,	PUNCT
futech-534	11	15	convergence	convergence	NOUN
futech-534	11	16	speed	speed	NOUN
futech-534	11	17	,	,	PUNCT
futech-534	11	18	and	and	CCONJ
futech-534	11	19	robustness	robustness	NOUN
futech-534	11	20	under	under	ADP
futech-534	11	21	noise	noise	NOUN
futech-534	11	22	and	and	CCONJ
futech-534	11	23	domain	domain	NOUN
futech-534	11	24	shifts	shift	NOUN
futech-534	11	25	.	.	PUNCT
futech-534	12	1	the	the	DET
futech-534	12	2	findings	finding	NOUN
futech-534	12	3	underscore	underscore	VERB
futech-534	12	4	substantial	substantial	ADJ
futech-534	12	5	operational	operational	ADJ
futech-534	12	6	implications	implication	NOUN
futech-534	12	7	for	for	ADP
futech-534	12	8	predictive	predictive	ADJ
futech-534	12	9	scheduling	scheduling	NOUN
futech-534	12	10	,	,	PUNCT
futech-534	12	11	resource	resource	NOUN
futech-534	12	12	allocation	allocation	NOUN
futech-534	12	13	,	,	PUNCT
futech-534	12	14	and	and	CCONJ
futech-534	12	15	sustainable	sustainable	ADJ
futech-534	12	16	production	production	NOUN
futech-534	12	17	within	within	ADP
futech-534	12	18	smart	smart	ADJ
futech-534	12	19	-	-	PUNCT
futech-534	12	20	fab	fab	NOUN
futech-534	12	21	ecosystems	ecosystem	NOUN
futech-534	12	22	.	.	PUNCT
futech-534	13	1	overall	overall	ADV
futech-534	13	2	,	,	PUNCT
futech-534	13	3	htl	htl	PROPN
futech-534	13	4	-	-	PUNCT
futech-534	13	5	hpo	hpo	PROPN
futech-534	13	6	offers	offer	VERB
futech-534	13	7	a	a	DET
futech-534	13	8	scalable	scalable	ADJ
futech-534	13	9	,	,	PUNCT
futech-534	13	10	interpretable	interpretable	ADJ
futech-534	13	11	,	,	PUNCT
futech-534	13	12	and	and	CCONJ
futech-534	13	13	deployment	deployment	NOUN
futech-534	13	14	-	-	PUNCT
futech-534	13	15	ready	ready	ADJ
futech-534	13	16	framework	framework	NOUN
futech-534	13	17	for	for	ADP
futech-534	13	18	next	next	ADJ
futech-534	13	19	-	-	PUNCT
futech-534	13	20	generation	generation	NOUN
futech-534	13	21	intelligent	intelligent	ADJ
futech-534	13	22	manufacturing	manufacturing	NOUN
futech-534	13	23	.	.	PUNCT
futech-534	14	1	1	1	X
futech-534	14	2	.	.	X
futech-534	14	3	introduction	introduction	NOUN
futech-534	14	4	the	the	DET
futech-534	14	5	semiconductor	semiconductor	NOUN
futech-534	14	6	industry	industry	NOUN
futech-534	14	7	is	be	AUX
futech-534	14	8	the	the	DET
futech-534	14	9	technological	technological	ADJ
futech-534	14	10	backbone	backbone	NOUN
futech-534	14	11	of	of	ADP
futech-534	14	12	the	the	DET
futech-534	14	13	global	global	ADJ
futech-534	14	14	digital	digital	ADJ
futech-534	14	15	economy	economy	NOUN
futech-534	14	16	,	,	PUNCT
futech-534	14	17	powering	power	VERB
futech-534	14	18	everything	everything	PRON
futech-534	14	19	from	from	ADP
futech-534	14	20	smartphones	smartphone	NOUN
futech-534	14	21	to	to	ADP
futech-534	14	22	advanced	advanced	ADJ
futech-534	14	23	computing	computing	NOUN
futech-534	14	24	systems	system	NOUN
futech-534	14	25	.	.	PUNCT
futech-534	15	1	as	as	SCONJ
futech-534	15	2	manufacturing	manufacture	VERB
futech-534	15	3	complexity	complexity	NOUN
futech-534	15	4	increases	increase	NOUN
futech-534	15	5	and	and	CCONJ
futech-534	15	6	device	device	NOUN
futech-534	15	7	geometries	geometry	NOUN
futech-534	15	8	continue	continue	VERB
futech-534	15	9	to	to	PART
futech-534	15	10	shrink	shrink	VERB
futech-534	15	11	,	,	PUNCT
futech-534	15	12	semiconductor	semiconductor	NOUN
futech-534	15	13	wafer	wafer	NOUN
futech-534	15	14	fabrication	fabrication	NOUN
futech-534	15	15	has	have	AUX
futech-534	15	16	become	become	VERB
futech-534	15	17	one	one	NUM
futech-534	15	18	of	of	ADP
futech-534	15	19	the	the	DET
futech-534	15	20	most	most	ADV
futech-534	15	21	data	datum	NOUN
futech-534	15	22	-	-	PUNCT
futech-534	15	23	intensive	intensive	ADJ
futech-534	15	24	and	and	CCONJ
futech-534	15	25	process	process	NOUN
futech-534	15	26	-	-	PUNCT
futech-534	15	27	sensitive	sensitive	ADJ
futech-534	15	28	production	production	NOUN
futech-534	15	29	environments	environment	NOUN
futech-534	15	30	worldwide	worldwide	ADV
futech-534	15	31	.	.	PUNCT
futech-534	16	1	within	within	ADP
futech-534	16	2	this	this	DET
futech-534	16	3	context	context	NOUN
futech-534	16	4	,	,	PUNCT
futech-534	16	5	cycle	cycle	NOUN
futech-534	16	6	time	time	NOUN
futech-534	16	7	(	(	PUNCT
futech-534	16	8	ct)—the	ct)—the	DET
futech-534	16	9	total	total	NOUN
futech-534	16	10	elapsed	elapse	VERB
futech-534	16	11	time	time	NOUN
futech-534	16	12	from	from	ADP
futech-534	16	13	wafer	wafer	NOUN
futech-534	16	14	lot	lot	NOUN
futech-534	16	15	release	release	NOUN
futech-534	16	16	to	to	ADP
futech-534	16	17	final	final	ADJ
futech-534	16	18	completion	completion	NOUN
futech-534	16	19	—	—	PUNCT
futech-534	16	20	serves	serve	VERB
futech-534	16	21	as	as	ADP
futech-534	16	22	a	a	DET
futech-534	16	23	key	key	ADJ
futech-534	16	24	performance	performance	NOUN
futech-534	16	25	indicator	indicator	NOUN
futech-534	16	26	for	for	ADP
futech-534	16	27	operational	operational	ADJ
futech-534	16	28	efficiency	efficiency	NOUN
futech-534	16	29	and	and	CCONJ
futech-534	16	30	competitive	competitive	ADJ
futech-534	16	31	advantage	advantage	NOUN
futech-534	16	32	[	[	X
futech-534	16	33	1	1	NUM
futech-534	16	34	]	]	PUNCT
futech-534	16	35	.	.	PUNCT
futech-534	17	1	efficient	efficient	ADJ
futech-534	17	2	ct	ct	PROPN
futech-534	17	3	forecasting	forecasting	NOUN
futech-534	17	4	enables	enable	VERB
futech-534	17	5	proactive	proactive	ADJ
futech-534	17	6	decision	decision	NOUN
futech-534	17	7	-	-	PUNCT
futech-534	17	8	making	making	NOUN
futech-534	17	9	in	in	ADP
futech-534	17	10	production	production	NOUN
futech-534	17	11	scheduling	scheduling	NOUN
futech-534	17	12	,	,	PUNCT
futech-534	17	13	bottleneck	bottleneck	NOUN
futech-534	17	14	control	control	NOUN
futech-534	17	15	,	,	PUNCT
futech-534	17	16	and	and	CCONJ
futech-534	17	17	throughput	throughput	NOUN
futech-534	17	18	optimization	optimization	NOUN
futech-534	17	19	,	,	PUNCT
futech-534	17	20	which	which	PRON
futech-534	17	21	are	be	AUX
futech-534	17	22	central	central	ADJ
futech-534	17	23	to	to	ADP
futech-534	17	24	maintaining	maintain	VERB
futech-534	17	25	profitability	profitability	NOUN
futech-534	17	26	and	and	CCONJ
futech-534	17	27	product	product	NOUN
futech-534	17	28	delivery	delivery	NOUN
futech-534	17	29	reliability	reliability	NOUN
futech-534	17	30	in	in	ADP
futech-534	17	31	modern	modern	ADJ
futech-534	17	32	fabrication	fabrication	NOUN
futech-534	17	33	facilities	facility	NOUN
futech-534	17	34	.	.	PUNCT
futech-534	18	1	despite	despite	SCONJ
futech-534	18	2	significant	significant	ADJ
futech-534	18	3	industrial	industrial	ADJ
futech-534	18	4	advancements	advancement	NOUN
futech-534	18	5	,	,	PUNCT
futech-534	18	6	ct	ct	NUM
futech-534	18	7	prediction	prediction	NOUN
futech-534	18	8	remains	remain	VERB
futech-534	18	9	an	an	DET
futech-534	18	10	enduring	endure	VERB
futech-534	18	11	challenge	challenge	NOUN
futech-534	18	12	due	due	ADP
futech-534	18	13	to	to	ADP
futech-534	18	14	the	the	DET
futech-534	18	15	highly	highly	ADV
futech-534	18	16	stochastic	stochastic	ADJ
futech-534	18	17	and	and	CCONJ
futech-534	18	18	nonlinear	nonlinear	ADJ
futech-534	18	19	nature	nature	NOUN
futech-534	18	20	of	of	ADP
futech-534	18	21	semiconductor	semiconductor	NOUN
futech-534	18	22	manufacturing	manufacturing	NOUN
futech-534	18	23	systems	system	NOUN
futech-534	18	24	[	[	X
futech-534	18	25	2	2	NUM
futech-534	18	26	]	]	PUNCT
futech-534	18	27	.	.	PUNCT
futech-534	19	1	these	these	DET
futech-534	19	2	systems	system	NOUN
futech-534	19	3	involve	involve	VERB
futech-534	19	4	hundreds	hundred	NOUN
futech-534	19	5	of	of	ADP
futech-534	19	6	sequential	sequential	ADJ
futech-534	19	7	and	and	CCONJ
futech-534	19	8	re	re	ADJ
futech-534	19	9	-	-	NOUN
futech-534	19	10	entrant	entrant	ADJ
futech-534	19	11	process	process	NOUN
futech-534	19	12	steps	step	NOUN
futech-534	19	13	,	,	PUNCT
futech-534	19	14	numerous	numerous	ADJ
futech-534	19	15	machine	machine	NOUN
futech-534	19	16	setups	setup	NOUN
futech-534	19	17	,	,	PUNCT
futech-534	19	18	and	and	CCONJ
futech-534	19	19	dynamically	dynamically	ADV
futech-534	19	20	changing	change	VERB
futech-534	19	21	tool	tool	NOUN
futech-534	19	22	states	state	NOUN
futech-534	19	23	,	,	PUNCT
futech-534	19	24	all	all	PRON
futech-534	19	25	of	of	ADP
futech-534	19	26	which	which	PRON
futech-534	19	27	introduce	introduce	VERB
futech-534	19	28	time	time	NOUN
futech-534	19	29	-	-	PUNCT
futech-534	19	30	varying	vary	VERB
futech-534	19	31	uncertainty	uncertainty	NOUN
futech-534	19	32	.	.	PUNCT
futech-534	20	1	factors	factor	NOUN
futech-534	20	2	such	such	ADJ
futech-534	20	3	as	as	ADP
futech-534	20	4	equipment	equipment	NOUN
futech-534	20	5	downtime	downtime	NOUN
futech-534	20	6	,	,	PUNCT
futech-534	20	7	maintenance	maintenance	NOUN
futech-534	20	8	schedules	schedule	NOUN
futech-534	20	9	,	,	PUNCT
futech-534	20	10	lot	lot	NOUN
futech-534	20	11	prioritization	prioritization	NOUN
futech-534	20	12	,	,	PUNCT
futech-534	20	13	and	and	CCONJ
futech-534	20	14	product	product	NOUN
futech-534	20	15	-	-	PUNCT
futech-534	20	16	mix	mix	NOUN
futech-534	20	17	variability	variability	NOUN
futech-534	20	18	exacerbate	exacerbate	VERB
futech-534	20	19	prediction	prediction	NOUN
futech-534	20	20	complexity	complexity	NOUN
futech-534	20	21	.	.	PUNCT
futech-534	21	1	consequently	consequently	ADV
futech-534	21	2	,	,	PUNCT
futech-534	21	3	traditional	traditional	ADJ
futech-534	21	4	statistical	statistical	ADJ
futech-534	21	5	models	model	NOUN
futech-534	21	6	like	like	ADP
futech-534	21	7	regression	regression	NOUN
futech-534	21	8	,	,	PUNCT
futech-534	21	9	arima	arima	NOUN
futech-534	21	10	,	,	PUNCT
futech-534	21	11	and	and	CCONJ
futech-534	21	12	queuing	queuing	NOUN
futech-534	21	13	theory	theory	NOUN
futech-534	21	14	fail	fail	VERB
futech-534	21	15	to	to	PART
futech-534	21	16	provide	provide	VERB
futech-534	21	17	accurate	accurate	ADJ
futech-534	21	18	forecasts	forecast	NOUN
futech-534	21	19	under	under	ADP
futech-534	21	20	real	real	ADJ
futech-534	21	21	-	-	PUNCT
futech-534	21	22	world	world	NOUN
futech-534	21	23	dynamic	dynamic	ADJ
futech-534	21	24	conditions	condition	NOUN
futech-534	21	25	[	[	X
futech-534	21	26	3	3	NUM
futech-534	21	27	]	]	PUNCT
futech-534	21	28	.	.	PUNCT
futech-534	22	1	such	such	ADJ
futech-534	22	2	models	model	NOUN
futech-534	22	3	assume	assume	VERB
futech-534	22	4	stationarity	stationarity	NOUN
futech-534	22	5	and	and	CCONJ
futech-534	22	6	linear	linear	ADJ
futech-534	22	7	relationships	relationship	NOUN
futech-534	22	8	between	between	ADP
futech-534	22	9	features	feature	NOUN
futech-534	22	10	—	—	PUNCT
futech-534	22	11	assumptions	assumption	NOUN
futech-534	22	12	that	that	PRON
futech-534	22	13	are	be	AUX
futech-534	22	14	rarely	rarely	ADV
futech-534	22	15	valid	valid	ADJ
futech-534	22	16	in	in	ADP
futech-534	22	17	semiconductor	semiconductor	NOUN
futech-534	22	18	environments	environment	NOUN
futech-534	22	19	.	.	PUNCT
futech-534	23	1	recent	recent	ADJ
futech-534	23	2	developments	development	NOUN
futech-534	23	3	in	in	ADP
futech-534	23	4	machine	machine	NOUN
futech-534	23	5	learning	learning	NOUN
futech-534	23	6	(	(	PUNCT
futech-534	23	7	ml	ml	NOUN
futech-534	23	8	)	)	PUNCT
futech-534	23	9	and	and	CCONJ
futech-534	23	10	deep	deep	ADJ
futech-534	23	11	learning	learning	NOUN
futech-534	23	12	(	(	PUNCT
futech-534	23	13	dl	dl	INTJ
futech-534	23	14	)	)	PUNCT
futech-534	23	15	have	have	AUX
futech-534	23	16	addressed	address	VERB
futech-534	23	17	some	some	PRON
futech-534	23	18	of	of	ADP
futech-534	23	19	these	these	DET
futech-534	23	20	limitations	limitation	NOUN
futech-534	23	21	by	by	ADP
futech-534	23	22	leveraging	leverage	VERB
futech-534	23	23	large	large	ADJ
futech-534	23	24	-	-	PUNCT
futech-534	23	25	scale	scale	NOUN
futech-534	23	26	historical	historical	ADJ
futech-534	23	27	data	datum	NOUN
futech-534	23	28	to	to	PART
futech-534	23	29	model	model	VERB
futech-534	23	30	nonlinear	nonlinear	ADJ
futech-534	23	31	temporal	temporal	ADJ
futech-534	23	32	relationships	relationship	NOUN
futech-534	23	33	.	.	PUNCT
futech-534	24	1	a	a	DET
futech-534	24	2	systematic	systematic	ADJ
futech-534	24	3	review	review	NOUN
futech-534	24	4	by	by	ADP
futech-534	24	5	leray	leray	NOUN
futech-534	24	6	and	and	CCONJ
futech-534	24	7	de	de	X
futech-534	24	8	gendt	gendt	PROPN
futech-534	25	1	[	[	X
futech-534	25	2	2	2	NUM
futech-534	25	3	]	]	PUNCT
futech-534	25	4	showed	show	VERB
futech-534	25	5	that	that	SCONJ
futech-534	25	6	the	the	DET
futech-534	25	7	application	application	NOUN
futech-534	25	8	of	of	ADP
futech-534	25	9	ml	ml	NOUN
futech-534	25	10	across	across	ADP
futech-534	25	11	semiconductor	semiconductor	NOUN
futech-534	25	12	processes	process	NOUN
futech-534	25	13	has	have	AUX
futech-534	25	14	revolutionized	revolutionize	VERB
futech-534	25	15	yield	yield	NOUN
futech-534	25	16	enhancement	enhancement	NOUN
futech-534	25	17	,	,	PUNCT
futech-534	25	18	defect	defect	ADJ
futech-534	25	19	detection	detection	NOUN
futech-534	25	20	,	,	PUNCT
futech-534	25	21	and	and	CCONJ
futech-534	25	22	production	production	NOUN
futech-534	25	23	planning	planning	NOUN
futech-534	25	24	.	.	PUNCT
futech-534	26	1	their	their	PRON
futech-534	26	2	findings	finding	NOUN
futech-534	26	3	emphasize	emphasize	VERB
futech-534	26	4	the	the	DET
futech-534	26	5	growing	grow	VERB
futech-534	26	6	reliance	reliance	NOUN
futech-534	26	7	on	on	ADP
futech-534	26	8	data	data	NOUN
futech-534	26	9	-	-	PUNCT
futech-534	26	10	driven	drive	VERB
futech-534	26	11	learning	learning	NOUN
futech-534	26	12	techniques	technique	NOUN
futech-534	26	13	as	as	ADP
futech-534	26	14	key	key	ADJ
futech-534	26	15	enablers	enabler	NOUN
futech-534	26	16	of	of	ADP
futech-534	26	17	smart	smart	ADJ
futech-534	26	18	manufacturing	manufacturing	NOUN
futech-534	26	19	and	and	CCONJ
futech-534	26	20	industry	industry	NOUN
futech-534	26	21	4.0	4.0	NUM
futech-534	26	22	integration	integration	NOUN
futech-534	26	23	.	.	PUNCT
futech-534	27	1	similarly	similarly	ADV
futech-534	27	2	,	,	PUNCT
futech-534	27	3	chen	chen	PROPN
futech-534	27	4	et	et	PROPN
futech-534	27	5	al	al	PROPN
futech-534	27	6	.	.	PUNCT
futech-534	28	1	[	[	X
futech-534	28	2	3	3	X
futech-534	28	3	]	]	PUNCT
futech-534	28	4	analyzed	analyze	VERB
futech-534	28	5	the	the	DET
futech-534	28	6	role	role	NOUN
futech-534	28	7	of	of	ADP
futech-534	28	8	advanced	advanced	ADJ
futech-534	28	9	ml	ml	NOUN
futech-534	28	10	methods	method	NOUN
futech-534	28	11	in	in	ADP
futech-534	28	12	process	process	NOUN
futech-534	28	13	optimization	optimization	NOUN
futech-534	28	14	,	,	PUNCT
futech-534	28	15	concluding	conclude	VERB
futech-534	28	16	that	that	DET
futech-534	28	17	algorithms	algorithm	NOUN
futech-534	28	18	capable	capable	ADJ
futech-534	28	19	of	of	ADP
futech-534	28	20	dynamic	dynamic	ADJ
futech-534	28	21	learning	learning	NOUN
futech-534	28	22	—	—	PUNCT
futech-534	28	23	such	such	ADJ
futech-534	28	24	as	as	ADP
futech-534	28	25	reinforcement	reinforcement	NOUN
futech-534	28	26	and	and	CCONJ
futech-534	28	27	february	february	PROPN
futech-534	28	28	2026|	2026|	NUM
futech-534	28	29	volume	volume	NOUN
futech-534	28	30	05	05	NUM
futech-534	29	1	|	|	ADV
futech-534	29	2	issue	issue	NOUN
futech-534	29	3	01	01	NUM
futech-534	30	1	|	|	ADV
futech-534	30	2	pages	page	VERB
futech-534	30	3	55	55	NUM
futech-534	30	4	-	-	SYM
futech-534	30	5	64	64	NUM
futech-534	30	6	issn	issn	VERB
futech-534	30	7	2832	2832	NUM
futech-534	30	8	-	-	SYM
futech-534	30	9	0379	0379	NUM
futech-534	30	10	open	open	ADJ
futech-534	30	11	access	access	NOUN
futech-534	30	12	journal	journal	PROPN
futech-534	30	13	journal	journal	PROPN
futech-534	30	14	homepage	homepage	NOUN
futech-534	30	15	:	:	PUNCT
futech-534	30	16	https://fupubco.com/futech	https://fupubco.com/futech	PROPN
futech-534	30	17	https://doi.org/10.55670/fpll.futech.5.1.6	https://doi.org/10.55670/fpll.futech.5.1.6	VERB
futech-534	30	18	future	future	ADJ
futech-534	30	19	technology	technology	NOUN
futech-534	30	20	mailto:anilkds.85@gmail.com	mailto:anilkds.85@gmail.com	PROPN
futech-534	30	21	https://fupubco.com/futech	https://fupubco.com/futech	PROPN
futech-534	30	22	https://doi.org/10.55670/fpll.futech.5.1.6	https://doi.org/10.55670/fpll.futech.5.1.6	PROPN
futech-534	31	1	ka	ka	PROPN
futech-534	31	2	.	.	PROPN
futech-534	31	3	kumar	kumar	PROPN
futech-534	31	4	&	&	CCONJ
futech-534	31	5	k.	k.	PROPN
futech-534	31	6	hemachandran	hemachandran	PROPN
futech-534	31	7	/	/	SYM
futech-534	31	8	future	future	ADJ
futech-534	31	9	technology	technology	NOUN
futech-534	31	10	february	february	PROPN
futech-534	31	11	2026|	2026|	NUM
futech-534	31	12	volume	volume	NOUN
futech-534	31	13	05	05	NUM
futech-534	32	1	|	|	ADV
futech-534	32	2	issue	issue	NOUN
futech-534	32	3	01	01	NUM
futech-534	33	1	|	|	ADV
futech-534	33	2	pages	page	VERB
futech-534	33	3	55	55	NUM
futech-534	33	4	-	-	SYM
futech-534	33	5	64	64	NUM
futech-534	33	6	56	56	NUM
futech-534	33	7	transfer	transfer	NOUN
futech-534	33	8	learning	learning	NOUN
futech-534	33	9	—	—	PUNCT
futech-534	33	10	significantly	significantly	ADV
futech-534	33	11	outperform	outperform	VERB
futech-534	33	12	static	static	ADJ
futech-534	33	13	models	model	NOUN
futech-534	33	14	in	in	ADP
futech-534	33	15	nonstationary	nonstationary	ADJ
futech-534	33	16	fab	fab	NOUN
futech-534	33	17	conditions	condition	NOUN
futech-534	33	18	.	.	PUNCT
futech-534	34	1	however	however	ADV
futech-534	34	2	,	,	PUNCT
futech-534	34	3	as	as	ADP
futech-534	34	4	the	the	DET
futech-534	34	5	size	size	NOUN
futech-534	34	6	of	of	ADP
futech-534	34	7	data	datum	NOUN
futech-534	34	8	and	and	CCONJ
futech-534	34	9	model	model	NOUN
futech-534	34	10	complexity	complexity	NOUN
futech-534	34	11	grow	grow	NOUN
futech-534	34	12	,	,	PUNCT
futech-534	34	13	scalability	scalability	NOUN
futech-534	34	14	and	and	CCONJ
futech-534	34	15	reproducibility	reproducibility	NOUN
futech-534	34	16	become	become	VERB
futech-534	34	17	major	major	ADJ
futech-534	34	18	barriers	barrier	NOUN
futech-534	34	19	.	.	PUNCT
futech-534	35	1	gentner	gentner	NOUN
futech-534	35	2	[	[	X
futech-534	35	3	4	4	NUM
futech-534	35	4	]	]	PUNCT
futech-534	35	5	highlighted	highlight	VERB
futech-534	35	6	that	that	SCONJ
futech-534	35	7	while	while	SCONJ
futech-534	35	8	deep	deep	ADJ
futech-534	35	9	neural	neural	ADJ
futech-534	35	10	networks	network	NOUN
futech-534	35	11	achieve	achieve	VERB
futech-534	35	12	high	high	ADJ
futech-534	35	13	predictive	predictive	ADJ
futech-534	35	14	accuracy	accuracy	NOUN
futech-534	35	15	,	,	PUNCT
futech-534	35	16	they	they	PRON
futech-534	35	17	often	often	ADV
futech-534	35	18	demand	demand	VERB
futech-534	35	19	extensive	extensive	ADJ
futech-534	35	20	computational	computational	ADJ
futech-534	35	21	resources	resource	NOUN
futech-534	35	22	and	and	CCONJ
futech-534	35	23	domain	domain	NOUN
futech-534	35	24	-	-	PUNCT
futech-534	35	25	specific	specific	ADJ
futech-534	35	26	fine	fine	ADJ
futech-534	35	27	-	-	PUNCT
futech-534	35	28	tuning	tuning	NOUN
futech-534	35	29	,	,	PUNCT
futech-534	35	30	which	which	PRON
futech-534	35	31	hinders	hinder	VERB
futech-534	35	32	large	large	ADJ
futech-534	35	33	-	-	PUNCT
futech-534	35	34	scale	scale	NOUN
futech-534	35	35	deployment	deployment	NOUN
futech-534	35	36	.	.	PUNCT
futech-534	36	1	to	to	PART
futech-534	36	2	mitigate	mitigate	VERB
futech-534	36	3	these	these	DET
futech-534	36	4	challenges	challenge	NOUN
futech-534	36	5	,	,	PUNCT
futech-534	36	6	hierarchical	hierarchical	ADJ
futech-534	36	7	model	model	NOUN
futech-534	36	8	architectures	architecture	NOUN
futech-534	36	9	and	and	CCONJ
futech-534	36	10	transfer	transfer	NOUN
futech-534	36	11	learning	learning	NOUN
futech-534	36	12	(	(	PUNCT
futech-534	36	13	tl	tl	PROPN
futech-534	36	14	)	)	PUNCT
futech-534	36	15	have	have	AUX
futech-534	36	16	emerged	emerge	VERB
futech-534	36	17	as	as	ADP
futech-534	36	18	promising	promising	ADJ
futech-534	36	19	solutions	solution	NOUN
futech-534	36	20	for	for	ADP
futech-534	36	21	knowledge	knowledge	NOUN
futech-534	36	22	reuse	reuse	NOUN
futech-534	36	23	between	between	ADP
futech-534	36	24	similar	similar	ADJ
futech-534	36	25	but	but	CCONJ
futech-534	36	26	distinct	distinct	ADJ
futech-534	36	27	fab	fab	NOUN
futech-534	36	28	environments	environment	NOUN
futech-534	36	29	.	.	PUNCT
futech-534	37	1	tl	tl	PROPN
futech-534	37	2	enables	enable	VERB
futech-534	37	3	models	model	NOUN
futech-534	37	4	trained	train	VERB
futech-534	37	5	on	on	ADP
futech-534	37	6	a	a	DET
futech-534	37	7	source	source	NOUN
futech-534	37	8	domain	domain	NOUN
futech-534	37	9	to	to	PART
futech-534	37	10	adapt	adapt	VERB
futech-534	37	11	efficiently	efficiently	ADV
futech-534	37	12	to	to	ADP
futech-534	37	13	a	a	DET
futech-534	37	14	target	target	NOUN
futech-534	37	15	domain	domain	NOUN
futech-534	37	16	with	with	ADP
futech-534	37	17	limited	limited	ADJ
futech-534	37	18	data	datum	NOUN
futech-534	37	19	.	.	PUNCT
futech-534	38	1	such	such	ADJ
futech-534	38	2	adaptability	adaptability	NOUN
futech-534	38	3	is	be	AUX
futech-534	38	4	essential	essential	ADJ
futech-534	38	5	when	when	SCONJ
futech-534	38	6	fabs	fab	NOUN
futech-534	38	7	share	share	VERB
futech-534	38	8	structural	structural	ADJ
futech-534	38	9	similarities	similarity	NOUN
futech-534	38	10	—	—	PUNCT
futech-534	38	11	such	such	ADJ
futech-534	38	12	as	as	ADP
futech-534	38	13	process	process	NOUN
futech-534	38	14	flows	flow	NOUN
futech-534	38	15	or	or	CCONJ
futech-534	38	16	equipment	equipment	NOUN
futech-534	38	17	configurations	configuration	NOUN
futech-534	38	18	—	—	PUNCT
futech-534	38	19	but	but	CCONJ
futech-534	38	20	differ	differ	VERB
futech-534	38	21	in	in	ADP
futech-534	38	22	operational	operational	ADJ
futech-534	38	23	conditions	condition	NOUN
futech-534	38	24	.	.	PUNCT
futech-534	39	1	in	in	ADP
futech-534	39	2	addition	addition	NOUN
futech-534	39	3	to	to	ADP
futech-534	39	4	architecture	architecture	NOUN
futech-534	39	5	design	design	NOUN
futech-534	39	6	,	,	PUNCT
futech-534	39	7	production	production	NOUN
futech-534	39	8	planning	planning	NOUN
futech-534	39	9	,	,	PUNCT
futech-534	39	10	and	and	CCONJ
futech-534	39	11	uncertainty	uncertainty	NOUN
futech-534	39	12	modeling	model	VERB
futech-534	39	13	play	play	VERB
futech-534	39	14	vital	vital	ADJ
futech-534	39	15	roles	role	NOUN
futech-534	39	16	in	in	ADP
futech-534	39	17	ct	ct	PROPN
futech-534	39	18	forecasting	forecasting	NOUN
futech-534	39	19	.	.	PUNCT
futech-534	40	1	rashidi	rashidi	PROPN
futech-534	40	2	et	et	PROPN
futech-534	40	3	al	al	PROPN
futech-534	40	4	.	.	PUNCT
futech-534	41	1	[	[	X
futech-534	41	2	5	5	NUM
futech-534	41	3	]	]	PUNCT
futech-534	41	4	demonstrated	demonstrate	VERB
futech-534	41	5	that	that	SCONJ
futech-534	41	6	stochastic	stochastic	ADJ
futech-534	41	7	variations	variation	NOUN
futech-534	41	8	in	in	ADP
futech-534	41	9	demand	demand	NOUN
futech-534	41	10	and	and	CCONJ
futech-534	41	11	yield	yield	VERB
futech-534	41	12	significantly	significantly	ADV
futech-534	41	13	influence	influence	NOUN
futech-534	41	14	forecasting	forecasting	NOUN
futech-534	41	15	reliability	reliability	NOUN
futech-534	41	16	,	,	PUNCT
futech-534	41	17	necessitating	necessitate	VERB
futech-534	41	18	predictive	predictive	ADJ
futech-534	41	19	frameworks	framework	NOUN
futech-534	41	20	capable	capable	ADJ
futech-534	41	21	of	of	ADP
futech-534	41	22	dynamically	dynamically	ADV
futech-534	41	23	adapting	adapt	VERB
futech-534	41	24	to	to	ADP
futech-534	41	25	operational	operational	ADJ
futech-534	41	26	fluctuations	fluctuation	NOUN
futech-534	41	27	.	.	PUNCT
futech-534	42	1	their	their	PRON
futech-534	42	2	findings	finding	NOUN
futech-534	42	3	reinforce	reinforce	VERB
futech-534	42	4	that	that	SCONJ
futech-534	42	5	forecasting	forecasting	NOUN
futech-534	42	6	models	model	NOUN
futech-534	42	7	must	must	AUX
futech-534	42	8	integrate	integrate	VERB
futech-534	42	9	both	both	DET
futech-534	42	10	data	data	NOUN
futech-534	42	11	-	-	PUNCT
futech-534	42	12	driven	drive	VERB
futech-534	42	13	intelligence	intelligence	NOUN
futech-534	42	14	and	and	CCONJ
futech-534	42	15	uncertainty	uncertainty	NOUN
futech-534	42	16	management	management	NOUN
futech-534	42	17	to	to	PART
futech-534	42	18	support	support	VERB
futech-534	42	19	robust	robust	ADJ
futech-534	42	20	decision	decision	NOUN
futech-534	42	21	-	-	PUNCT
futech-534	42	22	making	making	NOUN
futech-534	42	23	.	.	PUNCT
futech-534	43	1	complementary	complementary	ADJ
futech-534	43	2	to	to	ADP
futech-534	43	3	forecasting	forecasting	NOUN
futech-534	43	4	,	,	PUNCT
futech-534	43	5	defect	defect	VERB
futech-534	43	6	pattern	pattern	NOUN
futech-534	43	7	recognition	recognition	NOUN
futech-534	43	8	,	,	PUNCT
futech-534	43	9	and	and	CCONJ
futech-534	43	10	fault	fault	VERB
futech-534	43	11	diagnosis	diagnosis	NOUN
futech-534	43	12	have	have	AUX
futech-534	43	13	also	also	ADV
futech-534	43	14	benefited	benefit	VERB
futech-534	43	15	from	from	ADP
futech-534	43	16	ml	ml	PROPN
futech-534	43	17	applications	application	NOUN
futech-534	43	18	.	.	PUNCT
futech-534	44	1	taha	taha	PROPN
futech-534	45	1	[	[	X
futech-534	45	2	6	6	NUM
futech-534	45	3	]	]	PUNCT
futech-534	45	4	conducted	conduct	VERB
futech-534	45	5	an	an	DET
futech-534	45	6	extensive	extensive	ADJ
futech-534	45	7	evaluation	evaluation	NOUN
futech-534	45	8	of	of	ADP
futech-534	45	9	ml	ml	NOUN
futech-534	45	10	techniques	technique	NOUN
futech-534	45	11	for	for	ADP
futech-534	45	12	defectivepattern	defectivepattern	NOUN
futech-534	45	13	identification	identification	NOUN
futech-534	45	14	in	in	ADP
futech-534	45	15	wafer	wafer	NOUN
futech-534	45	16	maps	map	NOUN
futech-534	45	17	,	,	PUNCT
futech-534	45	18	concluding	conclude	VERB
futech-534	45	19	that	that	SCONJ
futech-534	45	20	hybrid	hybrid	ADJ
futech-534	45	21	deep	deep	ADJ
futech-534	45	22	-	-	PUNCT
futech-534	45	23	learning	learn	VERB
futech-534	45	24	models	model	NOUN
futech-534	45	25	improve	improve	VERB
futech-534	45	26	both	both	DET
futech-534	45	27	classification	classification	NOUN
futech-534	45	28	accuracy	accuracy	NOUN
futech-534	45	29	and	and	CCONJ
futech-534	45	30	generalization	generalization	NOUN
futech-534	45	31	.	.	PUNCT
futech-534	46	1	similarly	similarly	ADV
futech-534	46	2	,	,	PUNCT
futech-534	46	3	huang	huang	PROPN
futech-534	46	4	et	et	PROPN
futech-534	46	5	al	al	PROPN
futech-534	46	6	.	.	PUNCT
futech-534	47	1	[	[	X
futech-534	47	2	7	7	NUM
futech-534	47	3	]	]	PUNCT
futech-534	47	4	provided	provide	VERB
futech-534	47	5	a	a	DET
futech-534	47	6	comprehensive	comprehensive	ADJ
futech-534	47	7	taxonomy	taxonomy	NOUN
futech-534	47	8	of	of	ADP
futech-534	47	9	ml	ml	NOUN
futech-534	47	10	and	and	CCONJ
futech-534	47	11	dl	dl	PROPN
futech-534	47	12	methods	method	NOUN
futech-534	47	13	for	for	ADP
futech-534	47	14	semiconductor	semiconductor	NOUN
futech-534	47	15	analytics	analytic	NOUN
futech-534	47	16	,	,	PUNCT
futech-534	47	17	identifying	identify	VERB
futech-534	47	18	key	key	ADJ
futech-534	47	19	research	research	NOUN
futech-534	47	20	opportunities	opportunity	NOUN
futech-534	47	21	such	such	ADJ
futech-534	47	22	as	as	ADP
futech-534	47	23	federated	federated	ADJ
futech-534	47	24	learning	learning	NOUN
futech-534	47	25	,	,	PUNCT
futech-534	47	26	interpretability	interpretability	NOUN
futech-534	47	27	,	,	PUNCT
futech-534	47	28	and	and	CCONJ
futech-534	47	29	scalable	scalable	ADJ
futech-534	47	30	architectures	architecture	NOUN
futech-534	47	31	.	.	PUNCT
futech-534	48	1	their	their	PRON
futech-534	48	2	review	review	NOUN
futech-534	48	3	underscores	underscore	VERB
futech-534	48	4	the	the	DET
futech-534	48	5	urgent	urgent	ADJ
futech-534	48	6	need	need	NOUN
futech-534	48	7	for	for	ADP
futech-534	48	8	hybrid	hybrid	ADJ
futech-534	48	9	systems	system	NOUN
futech-534	48	10	that	that	PRON
futech-534	48	11	merge	merge	VERB
futech-534	48	12	predictive	predictive	ADJ
futech-534	48	13	modeling	modeling	NOUN
futech-534	48	14	with	with	ADP
futech-534	48	15	explainability	explainability	NOUN
futech-534	48	16	and	and	CCONJ
futech-534	48	17	trustworthiness	trustworthiness	NOUN
futech-534	48	18	.	.	PUNCT
futech-534	49	1	parallel	parallel	ADJ
futech-534	49	2	efforts	effort	NOUN
futech-534	49	3	have	have	AUX
futech-534	49	4	focused	focus	VERB
futech-534	49	5	on	on	ADP
futech-534	49	6	neural	neural	ADJ
futech-534	49	7	-	-	PUNCT
futech-534	49	8	network	network	NOUN
futech-534	49	9	-	-	PUNCT
futech-534	49	10	based	base	VERB
futech-534	49	11	predictive	predictive	ADJ
futech-534	49	12	modeling	modeling	NOUN
futech-534	49	13	for	for	ADP
futech-534	49	14	estimating	estimate	VERB
futech-534	49	15	product	product	NOUN
futech-534	49	16	characteristics	characteristic	NOUN
futech-534	49	17	and	and	CCONJ
futech-534	49	18	yield	yield	NOUN
futech-534	49	19	behavior	behavior	NOUN
futech-534	49	20	.	.	PUNCT
futech-534	50	1	umamahesh	umamahesh	PROPN
futech-534	50	2	ritty	ritty	PROPN
futech-534	51	1	[	[	X
futech-534	51	2	8	8	NUM
futech-534	51	3	]	]	PUNCT
futech-534	51	4	explored	explore	VERB
futech-534	51	5	neural	neural	ADJ
futech-534	51	6	network	network	NOUN
futech-534	51	7	architectures	architecture	NOUN
futech-534	51	8	for	for	ADP
futech-534	51	9	semiconductor	semiconductor	NOUN
futech-534	51	10	product	product	NOUN
futech-534	51	11	quality	quality	NOUN
futech-534	51	12	prediction	prediction	NOUN
futech-534	51	13	,	,	PUNCT
futech-534	51	14	demonstrating	demonstrate	VERB
futech-534	51	15	their	their	PRON
futech-534	51	16	ability	ability	NOUN
futech-534	51	17	to	to	PART
futech-534	51	18	capture	capture	VERB
futech-534	51	19	nonlinear	nonlinear	ADJ
futech-534	51	20	process	process	NOUN
futech-534	51	21	–	–	PUNCT
futech-534	51	22	output	output	NOUN
futech-534	51	23	relationships	relationship	NOUN
futech-534	51	24	.	.	PUNCT
futech-534	52	1	expanding	expand	VERB
futech-534	52	2	on	on	ADP
futech-534	52	3	this	this	PRON
futech-534	52	4	,	,	PUNCT
futech-534	52	5	xu	xu	PROPN
futech-534	52	6	et	et	PROPN
futech-534	52	7	al	al	PROPN
futech-534	52	8	.	.	PUNCT
futech-534	53	1	[	[	X
futech-534	53	2	9	9	NUM
futech-534	53	3	]	]	PUNCT
futech-534	53	4	introduced	introduce	VERB
futech-534	53	5	a	a	DET
futech-534	53	6	fast	fast	ADJ
futech-534	53	7	ramp	ramp	NOUN
futech-534	53	8	-	-	PUNCT
futech-534	53	9	up	up	ADP
futech-534	53	10	framework	framework	NOUN
futech-534	53	11	for	for	ADP
futech-534	53	12	yield	yield	NOUN
futech-534	53	13	improvement	improvement	NOUN
futech-534	53	14	that	that	PRON
futech-534	53	15	leverages	leverage	VERB
futech-534	53	16	production	production	NOUN
futech-534	53	17	data	datum	NOUN
futech-534	53	18	analytics	analytic	NOUN
futech-534	53	19	to	to	PART
futech-534	53	20	accelerate	accelerate	VERB
futech-534	53	21	process	process	NOUN
futech-534	53	22	stabilization	stabilization	NOUN
futech-534	53	23	during	during	ADP
futech-534	53	24	new	new	ADJ
futech-534	53	25	product	product	NOUN
futech-534	53	26	introduction	introduction	NOUN
futech-534	53	27	phases	phase	NOUN
futech-534	53	28	.	.	PUNCT
futech-534	54	1	these	these	DET
futech-534	54	2	advances	advance	NOUN
futech-534	54	3	highlight	highlight	VERB
futech-534	54	4	that	that	SCONJ
futech-534	54	5	data	data	NOUN
futech-534	54	6	-	-	PUNCT
futech-534	54	7	driven	drive	VERB
futech-534	54	8	modeling	modeling	NOUN
futech-534	54	9	—	—	PUNCT
futech-534	54	10	when	when	SCONJ
futech-534	54	11	combined	combine	VERB
futech-534	54	12	with	with	ADP
futech-534	54	13	adaptive	adaptive	ADJ
futech-534	54	14	transfer	transfer	NOUN
futech-534	54	15	learning	learning	NOUN
futech-534	54	16	—	—	PUNCT
futech-534	54	17	can	can	AUX
futech-534	54	18	enhance	enhance	VERB
futech-534	54	19	both	both	PRON
futech-534	54	20	yield	yield	NOUN
futech-534	54	21	and	and	CCONJ
futech-534	54	22	cycletime	cycletime	NOUN
futech-534	54	23	forecasting	forecasting	NOUN
futech-534	54	24	accuracy	accuracy	NOUN
futech-534	54	25	.	.	PUNCT
futech-534	55	1	beyond	beyond	ADP
futech-534	55	2	yield	yield	NOUN
futech-534	55	3	prediction	prediction	NOUN
futech-534	55	4	,	,	PUNCT
futech-534	55	5	computer	computer	NOUN
futech-534	55	6	vision	vision	NOUN
futech-534	55	7	and	and	CCONJ
futech-534	55	8	deep	deep	ADJ
futech-534	55	9	learning	learning	NOUN
futech-534	55	10	models	model	NOUN
futech-534	55	11	have	have	AUX
futech-534	55	12	been	be	AUX
futech-534	55	13	employed	employ	VERB
futech-534	55	14	for	for	ADP
futech-534	55	15	localized	localize	VERB
futech-534	55	16	fault	fault	NOUN
futech-534	55	17	detection	detection	NOUN
futech-534	55	18	and	and	CCONJ
futech-534	55	19	spatial	spatial	ADJ
futech-534	55	20	anomaly	anomaly	NOUN
futech-534	55	21	recognition	recognition	NOUN
futech-534	55	22	.	.	PUNCT
futech-534	56	1	shahroz	shahroz	PROPN
futech-534	56	2	et	et	PROPN
futech-534	56	3	al	al	PROPN
futech-534	56	4	.	.	PUNCT
futech-534	57	1	[	[	X
futech-534	57	2	10	10	NUM
futech-534	57	3	]	]	PUNCT
futech-534	57	4	proposed	propose	VERB
futech-534	57	5	a	a	DET
futech-534	57	6	hierarchical	hierarchical	ADJ
futech-534	57	7	attention	attention	NOUN
futech-534	57	8	-	-	PUNCT
futech-534	57	9	based	base	VERB
futech-534	57	10	convolutional	convolutional	ADJ
futech-534	57	11	network	network	NOUN
futech-534	57	12	for	for	ADP
futech-534	57	13	wafer	wafer	NOUN
futech-534	57	14	hotspot	hotspot	NOUN
futech-534	57	15	detection	detection	NOUN
futech-534	57	16	,	,	PUNCT
futech-534	57	17	offering	offer	VERB
futech-534	57	18	fine	fine	ADV
futech-534	57	19	-	-	PUNCT
futech-534	57	20	grained	grain	VERB
futech-534	57	21	localization	localization	NOUN
futech-534	57	22	capability	capability	NOUN
futech-534	57	23	and	and	CCONJ
futech-534	57	24	improved	improve	VERB
futech-534	57	25	interpretability	interpretability	NOUN
futech-534	57	26	over	over	ADP
futech-534	57	27	traditional	traditional	ADJ
futech-534	57	28	cnn	cnn	PROPN
futech-534	57	29	architectures	architecture	NOUN
futech-534	57	30	.	.	PUNCT
futech-534	58	1	likewise	likewise	ADV
futech-534	58	2	,	,	PUNCT
futech-534	58	3	lee	lee	PROPN
futech-534	58	4	and	and	CCONJ
futech-534	58	5	lee	lee	PROPN
futech-534	59	1	[	[	X
futech-534	59	2	11	11	NUM
futech-534	59	3	]	]	PUNCT
futech-534	59	4	developed	develop	VERB
futech-534	59	5	a	a	DET
futech-534	59	6	deep	deep	ADJ
futech-534	59	7	reinforcement	reinforcement	NOUN
futech-534	59	8	learning	learning	NOUN
futech-534	59	9	framework	framework	NOUN
futech-534	59	10	to	to	PART
futech-534	59	11	optimize	optimize	VERB
futech-534	59	12	scheduling	scheduling	NOUN
futech-534	59	13	and	and	CCONJ
futech-534	59	14	dispatching	dispatch	VERB
futech-534	59	15	decisions	decision	NOUN
futech-534	59	16	under	under	ADP
futech-534	59	17	varying	vary	VERB
futech-534	59	18	production	production	NOUN
futech-534	59	19	loads	load	NOUN
futech-534	59	20	,	,	PUNCT
futech-534	59	21	proving	prove	VERB
futech-534	59	22	that	that	SCONJ
futech-534	59	23	adaptive	adaptive	ADJ
futech-534	59	24	policies	policy	NOUN
futech-534	59	25	can	can	AUX
futech-534	59	26	reduce	reduce	VERB
futech-534	59	27	overall	overall	ADJ
futech-534	59	28	ct	ct	NOUN
futech-534	59	29	variability	variability	NOUN
futech-534	59	30	without	without	ADP
futech-534	59	31	explicit	explicit	ADJ
futech-534	59	32	rule	rule	NOUN
futech-534	59	33	-	-	PUNCT
futech-534	59	34	based	base	VERB
futech-534	59	35	control	control	NOUN
futech-534	59	36	.	.	PUNCT
futech-534	60	1	their	their	PRON
futech-534	60	2	work	work	NOUN
futech-534	60	3	demonstrates	demonstrate	VERB
futech-534	60	4	that	that	SCONJ
futech-534	60	5	rl	rl	NOUN
futech-534	60	6	-	-	PUNCT
futech-534	60	7	based	base	VERB
futech-534	60	8	learning	learning	NOUN
futech-534	60	9	can	can	AUX
futech-534	60	10	effectively	effectively	ADV
futech-534	60	11	bridge	bridge	VERB
futech-534	60	12	the	the	DET
futech-534	60	13	gap	gap	NOUN
futech-534	60	14	between	between	ADP
futech-534	60	15	local	local	ADJ
futech-534	60	16	decision	decision	NOUN
futech-534	60	17	-	-	PUNCT
futech-534	60	18	making	making	NOUN
futech-534	60	19	and	and	CCONJ
futech-534	60	20	system	system	NOUN
futech-534	60	21	-	-	PUNCT
futech-534	60	22	level	level	NOUN
futech-534	60	23	optimization	optimization	NOUN
futech-534	60	24	.	.	PUNCT
futech-534	61	1	furthermore	furthermore	ADV
futech-534	61	2	,	,	PUNCT
futech-534	61	3	recent	recent	ADJ
futech-534	61	4	studies	study	NOUN
futech-534	61	5	emphasize	emphasize	VERB
futech-534	61	6	the	the	DET
futech-534	61	7	transition	transition	NOUN
futech-534	61	8	from	from	ADP
futech-534	61	9	reactive	reactive	ADJ
futech-534	61	10	to	to	ADP
futech-534	61	11	predictive	predictive	ADJ
futech-534	61	12	maintenance	maintenance	NOUN
futech-534	61	13	paradigms	paradigm	VERB
futech-534	61	14	through	through	ADP
futech-534	61	15	remaining	remain	VERB
futech-534	61	16	useful	useful	ADJ
futech-534	61	17	lifetime	lifetime	NOUN
futech-534	61	18	(	(	PUNCT
futech-534	61	19	rul	rul	NOUN
futech-534	61	20	)	)	PUNCT
futech-534	61	21	estimation	estimation	NOUN
futech-534	61	22	frameworks	framework	NOUN
futech-534	61	23	.	.	PUNCT
futech-534	62	1	adaloudis	adaloudi	NOUN
futech-534	63	1	[	[	X
futech-534	63	2	12	12	NUM
futech-534	63	3	]	]	PUNCT
futech-534	63	4	presented	present	VERB
futech-534	63	5	an	an	DET
futech-534	63	6	ml	ml	NOUN
futech-534	63	7	-	-	PUNCT
futech-534	63	8	based	base	VERB
futech-534	63	9	rul	rul	NOUN
futech-534	63	10	prediction	prediction	NOUN
futech-534	63	11	approach	approach	NOUN
futech-534	63	12	tailored	tailor	VERB
futech-534	63	13	to	to	ADP
futech-534	63	14	semiconductor	semiconductor	NOUN
futech-534	63	15	manufacturing	manufacturing	NOUN
futech-534	63	16	,	,	PUNCT
futech-534	63	17	enabling	enable	VERB
futech-534	63	18	early	early	ADJ
futech-534	63	19	detection	detection	NOUN
futech-534	63	20	of	of	ADP
futech-534	63	21	tool	tool	NOUN
futech-534	63	22	degradation	degradation	NOUN
futech-534	63	23	and	and	CCONJ
futech-534	63	24	process	process	NOUN
futech-534	63	25	drifts	drift	NOUN
futech-534	63	26	.	.	PUNCT
futech-534	64	1	such	such	ADJ
futech-534	64	2	predictivemaintenance	predictivemaintenance	NOUN
futech-534	64	3	capabilities	capabilitie	VERB
futech-534	64	4	not	not	PART
futech-534	64	5	only	only	ADV
futech-534	64	6	prevent	prevent	VERB
futech-534	64	7	unexpected	unexpected	ADJ
futech-534	64	8	downtime	downtime	NOUN
futech-534	64	9	but	but	CCONJ
futech-534	64	10	also	also	ADV
futech-534	64	11	improve	improve	VERB
futech-534	64	12	cycle	cycle	NOUN
futech-534	64	13	-	-	PUNCT
futech-534	64	14	time	time	NOUN
futech-534	64	15	predictability	predictability	NOUN
futech-534	64	16	by	by	ADP
futech-534	64	17	maintaining	maintain	VERB
futech-534	64	18	equipment	equipment	NOUN
futech-534	64	19	reliability	reliability	NOUN
futech-534	64	20	and	and	CCONJ
futech-534	64	21	consistency	consistency	NOUN
futech-534	64	22	.	.	PUNCT
futech-534	65	1	the	the	DET
futech-534	65	2	convergence	convergence	NOUN
futech-534	65	3	of	of	ADP
futech-534	65	4	these	these	DET
futech-534	65	5	research	research	NOUN
futech-534	65	6	directions	direction	NOUN
futech-534	65	7	establishes	establish	VERB
futech-534	65	8	a	a	DET
futech-534	65	9	compelling	compelling	ADJ
futech-534	65	10	rationale	rationale	NOUN
futech-534	65	11	for	for	ADP
futech-534	65	12	developing	develop	VERB
futech-534	65	13	an	an	DET
futech-534	65	14	integrated	integrate	VERB
futech-534	65	15	hierarchical	hierarchical	ADJ
futech-534	65	16	transfer	transfer	NOUN
futech-534	65	17	learning	learn	VERB
futech-534	65	18	with	with	ADP
futech-534	65	19	hyperparameter	hyperparameter	NOUN
futech-534	65	20	optimization	optimization	NOUN
futech-534	65	21	(	(	PUNCT
futech-534	65	22	htl	htl	PROPN
futech-534	65	23	-	-	PUNCT
futech-534	65	24	hpo	hpo	PROPN
futech-534	65	25	)	)	PUNCT
futech-534	65	26	framework	framework	NOUN
futech-534	65	27	.	.	PUNCT
futech-534	66	1	the	the	DET
futech-534	66	2	hierarchical	hierarchical	ADJ
futech-534	66	3	aspect	aspect	NOUN
futech-534	66	4	captures	capture	VERB
futech-534	66	5	cross	cross	ADJ
futech-534	66	6	-	-	ADJ
futech-534	66	7	domain	domain	ADJ
futech-534	66	8	temporal	temporal	ADJ
futech-534	66	9	dependencies	dependency	NOUN
futech-534	66	10	across	across	ADP
futech-534	66	11	multiple	multiple	ADJ
futech-534	66	12	fabs	fab	NOUN
futech-534	66	13	,	,	PUNCT
futech-534	66	14	while	while	SCONJ
futech-534	66	15	the	the	DET
futech-534	66	16	optimization	optimization	NOUN
futech-534	66	17	component	component	NOUN
futech-534	66	18	automates	automate	VERB
futech-534	66	19	the	the	DET
futech-534	66	20	tuning	tuning	NOUN
futech-534	66	21	of	of	ADP
futech-534	66	22	critical	critical	ADJ
futech-534	66	23	learning	learning	NOUN
futech-534	66	24	parameters	parameter	NOUN
futech-534	66	25	.	.	PUNCT
futech-534	67	1	together	together	ADV
futech-534	67	2	,	,	PUNCT
futech-534	67	3	they	they	PRON
futech-534	67	4	address	address	VERB
futech-534	67	5	three	three	NUM
futech-534	67	6	persistent	persistent	ADJ
futech-534	67	7	challenges	challenge	NOUN
futech-534	67	8	:	:	PUNCT
futech-534	67	9	•	•	ADP
futech-534	67	10	the	the	DET
futech-534	67	11	limited	limited	ADJ
futech-534	67	12	generalization	generalization	NOUN
futech-534	67	13	capability	capability	NOUN
futech-534	67	14	of	of	ADP
futech-534	67	15	single	single	ADJ
futech-534	67	16	-	-	PUNCT
futech-534	67	17	domain	domain	NOUN
futech-534	67	18	models	model	NOUN
futech-534	67	19	.	.	PUNCT
futech-534	68	1	•	•	NUM
futech-534	68	2	the	the	DET
futech-534	68	3	manual	manual	NOUN
futech-534	68	4	and	and	CCONJ
futech-534	68	5	computationally	computationally	ADV
futech-534	68	6	expensive	expensive	ADJ
futech-534	68	7	nature	nature	NOUN
futech-534	68	8	of	of	ADP
futech-534	68	9	hyperparameter	hyperparameter	NOUN
futech-534	68	10	tuning	tune	VERB
futech-534	68	11	.	.	PUNCT
futech-534	69	1	•	•	NUM
futech-534	69	2	the	the	DET
futech-534	69	3	need	need	NOUN
futech-534	69	4	for	for	ADP
futech-534	69	5	scalable	scalable	ADJ
futech-534	69	6	,	,	PUNCT
futech-534	69	7	data	datum	NOUN
futech-534	69	8	-	-	PUNCT
futech-534	69	9	efficient	efficient	ADJ
futech-534	69	10	,	,	PUNCT
futech-534	69	11	and	and	CCONJ
futech-534	69	12	self	self	NOUN
futech-534	69	13	-	-	PUNCT
futech-534	69	14	adaptive	adaptive	ADJ
futech-534	69	15	forecasting	forecasting	NOUN
futech-534	69	16	frameworks	framework	NOUN
futech-534	69	17	in	in	ADP
futech-534	69	18	high	high	ADJ
futech-534	69	19	-	-	PUNCT
futech-534	69	20	mix	mix	NOUN
futech-534	69	21	,	,	PUNCT
futech-534	69	22	low	low	ADJ
futech-534	69	23	-	-	PUNCT
futech-534	69	24	volume	volume	NOUN
futech-534	69	25	manufacturing	manufacturing	NOUN
futech-534	69	26	environments	environment	NOUN
futech-534	69	27	.	.	PUNCT
futech-534	70	1	in	in	ADP
futech-534	70	2	summary	summary	NOUN
futech-534	70	3	,	,	PUNCT
futech-534	70	4	this	this	DET
futech-534	70	5	paper	paper	NOUN
futech-534	70	6	proposes	propose	VERB
futech-534	70	7	an	an	DET
futech-534	70	8	htl	htl	PROPN
futech-534	70	9	-	-	PUNCT
futech-534	70	10	hpo	hpo	PROPN
futech-534	70	11	framework	framework	NOUN
futech-534	70	12	that	that	PRON
futech-534	70	13	unifies	unify	VERB
futech-534	70	14	hierarchical	hierarchical	ADJ
futech-534	70	15	transfer	transfer	NOUN
futech-534	70	16	learning	learn	VERB
futech-534	70	17	with	with	ADP
futech-534	70	18	bayesian	bayesian	NOUN
futech-534	70	19	and	and	CCONJ
futech-534	70	20	tpe	tpe	NOUN
futech-534	70	21	-	-	PUNCT
futech-534	70	22	based	base	VERB
futech-534	70	23	optimization	optimization	NOUN
futech-534	70	24	to	to	PART
futech-534	70	25	enhance	enhance	VERB
futech-534	70	26	ct	ct	NUM
futech-534	70	27	forecasting	forecasting	NOUN
futech-534	70	28	accuracy	accuracy	NOUN
futech-534	70	29	,	,	PUNCT
futech-534	70	30	robustness	robustness	NOUN
futech-534	70	31	,	,	PUNCT
futech-534	70	32	and	and	CCONJ
futech-534	70	33	adaptability	adaptability	NOUN
futech-534	70	34	across	across	ADP
futech-534	70	35	semiconductor	semiconductor	NOUN
futech-534	70	36	fabs	fab	NOUN
futech-534	70	37	2	2	NUM
futech-534	70	38	.	.	PUNCT
futech-534	70	39	literature	literature	PROPN
futech-534	70	40	review	review	VERB
futech-534	70	41	2.1	2.1	NUM
futech-534	70	42	data	data	NOUN
futech-534	70	43	-	-	PUNCT
futech-534	70	44	driven	drive	VERB
futech-534	70	45	approaches	approach	NOUN
futech-534	70	46	for	for	ADP
futech-534	70	47	cycle	cycle	NOUN
futech-534	70	48	time	time	NOUN
futech-534	70	49	forecasting	forecasting	NOUN
futech-534	70	50	forecasting	forecasting	NOUN
futech-534	70	51	cycle	cycle	NOUN
futech-534	70	52	time	time	NOUN
futech-534	70	53	(	(	PUNCT
futech-534	70	54	ct	ct	NOUN
futech-534	70	55	)	)	PUNCT
futech-534	70	56	in	in	ADP
futech-534	70	57	semiconductor	semiconductor	NOUN
futech-534	70	58	manufacturing	manufacturing	NOUN
futech-534	70	59	has	have	AUX
futech-534	70	60	long	long	ADV
futech-534	70	61	been	be	AUX
futech-534	70	62	a	a	DET
futech-534	70	63	critical	critical	ADJ
futech-534	70	64	research	research	NOUN
futech-534	70	65	area	area	NOUN
futech-534	70	66	due	due	ADP
futech-534	70	67	to	to	ADP
futech-534	70	68	the	the	DET
futech-534	70	69	stochastic	stochastic	ADJ
futech-534	70	70	and	and	CCONJ
futech-534	70	71	nonlinear	nonlinear	ADJ
futech-534	70	72	characteristics	characteristic	NOUN
futech-534	70	73	of	of	ADP
futech-534	70	74	the	the	DET
futech-534	70	75	fabrication	fabrication	NOUN
futech-534	70	76	process	process	NOUN
futech-534	70	77	.	.	PUNCT
futech-534	71	1	espadinha	espadinha	PROPN
futech-534	71	2	-	-	NOUN
futech-534	71	3	cruz	cruz	PROPN
futech-534	71	4	et	et	PROPN
futech-534	71	5	al	al	PROPN
futech-534	71	6	.	.	PUNCT
futech-534	72	1	[	[	X
futech-534	72	2	13	13	NUM
futech-534	72	3	]	]	PUNCT
futech-534	72	4	provided	provide	VERB
futech-534	72	5	one	one	NUM
futech-534	72	6	of	of	ADP
futech-534	72	7	the	the	DET
futech-534	72	8	earliest	early	ADJ
futech-534	72	9	comprehensive	comprehensive	ADJ
futech-534	72	10	reviews	review	NOUN
futech-534	72	11	of	of	ADP
futech-534	72	12	data	data	NOUN
futech-534	72	13	-	-	PUNCT
futech-534	72	14	mining	mining	NOUN
futech-534	72	15	applications	application	NOUN
futech-534	72	16	in	in	ADP
futech-534	72	17	semiconductor	semiconductor	NOUN
futech-534	72	18	manufacturing	manufacturing	NOUN
futech-534	72	19	,	,	PUNCT
futech-534	72	20	emphasizing	emphasize	VERB
futech-534	72	21	that	that	SCONJ
futech-534	72	22	the	the	DET
futech-534	72	23	selection	selection	NOUN
futech-534	72	24	of	of	ADP
futech-534	72	25	process	process	NOUN
futech-534	72	26	drivers	driver	NOUN
futech-534	72	27	,	,	PUNCT
futech-534	72	28	queue	queue	NOUN
futech-534	72	29	-	-	PUNCT
futech-534	72	30	time	time	NOUN
futech-534	72	31	features	feature	NOUN
futech-534	72	32	,	,	PUNCT
futech-534	72	33	and	and	CCONJ
futech-534	72	34	equipment	equipment	NOUN
futech-534	72	35	parameters	parameter	NOUN
futech-534	72	36	strongly	strongly	ADV
futech-534	72	37	influences	influence	VERB
futech-534	72	38	the	the	DET
futech-534	72	39	accuracy	accuracy	NOUN
futech-534	72	40	and	and	CCONJ
futech-534	72	41	robustness	robustness	NOUN
futech-534	72	42	of	of	ADP
futech-534	72	43	ct	ct	NUM
futech-534	72	44	predictions	prediction	NOUN
futech-534	72	45	.	.	PUNCT
futech-534	73	1	their	their	PRON
futech-534	73	2	work	work	NOUN
futech-534	73	3	established	establish	VERB
futech-534	73	4	a	a	DET
futech-534	73	5	foundation	foundation	NOUN
futech-534	73	6	for	for	ADP
futech-534	73	7	data	data	NOUN
futech-534	73	8	-	-	PUNCT
futech-534	73	9	driven	drive	VERB
futech-534	73	10	modeling	modeling	NOUN
futech-534	73	11	by	by	ADP
futech-534	73	12	demonstrating	demonstrate	VERB
futech-534	73	13	how	how	SCONJ
futech-534	73	14	feature	feature	NOUN
futech-534	73	15	engineering	engineering	NOUN
futech-534	73	16	can	can	AUX
futech-534	73	17	reveal	reveal	VERB
futech-534	73	18	latent	latent	NOUN
futech-534	73	19	process	process	NOUN
futech-534	73	20	dependencies	dependency	NOUN
futech-534	73	21	that	that	SCONJ
futech-534	73	22	traditional	traditional	ADJ
futech-534	73	23	regression	regression	NOUN
futech-534	73	24	or	or	CCONJ
futech-534	73	25	analytical	analytical	ADJ
futech-534	73	26	models	model	NOUN
futech-534	73	27	often	often	ADV
futech-534	73	28	overlook	overlook	VERB
futech-534	73	29	.	.	PUNCT
futech-534	74	1	to	to	PART
futech-534	74	2	address	address	VERB
futech-534	74	3	the	the	DET
futech-534	74	4	limitations	limitation	NOUN
futech-534	74	5	of	of	ADP
futech-534	74	6	static	static	ADJ
futech-534	74	7	scheduling	scheduling	NOUN
futech-534	74	8	systems	system	NOUN
futech-534	74	9	,	,	PUNCT
futech-534	74	10	xia	xia	PROPN
futech-534	74	11	et	et	PROPN
futech-534	74	12	al	al	PROPN
futech-534	74	13	.	.	PUNCT
futech-534	75	1	[	[	X
futech-534	75	2	14	14	NUM
futech-534	75	3	]	]	PUNCT
futech-534	75	4	introduced	introduce	VERB
futech-534	75	5	a	a	DET
futech-534	75	6	dynamic	dynamic	ADJ
futech-534	75	7	dispatching	dispatching	NOUN
futech-534	75	8	method	method	NOUN
futech-534	75	9	for	for	ADP
futech-534	75	10	large	large	ADJ
futech-534	75	11	-	-	PUNCT
futech-534	75	12	scale	scale	NOUN
futech-534	75	13	interbay	interbay	NOUN
futech-534	75	14	material	material	NOUN
futech-534	75	15	-	-	PUNCT
futech-534	75	16	handling	handle	VERB
futech-534	75	17	systems	system	NOUN
futech-534	75	18	in	in	ADP
futech-534	75	19	wafer	wafer	NOUN
futech-534	75	20	fabs	fab	NOUN
futech-534	75	21	.	.	PUNCT
futech-534	76	1	their	their	PRON
futech-534	76	2	study	study	NOUN
futech-534	76	3	demonstrated	demonstrate	VERB
futech-534	76	4	that	that	SCONJ
futech-534	76	5	adaptive	adaptive	ADJ
futech-534	76	6	,	,	PUNCT
futech-534	76	7	feedback	feedback	NOUN
futech-534	76	8	-	-	PUNCT
futech-534	76	9	driven	drive	VERB
futech-534	76	10	dispatching	dispatch	VERB
futech-534	76	11	rules	rule	NOUN
futech-534	76	12	could	could	AUX
futech-534	76	13	effectively	effectively	ADV
futech-534	76	14	minimize	minimize	VERB
futech-534	76	15	ct	ct	NUM
futech-534	76	16	variability	variability	NOUN
futech-534	76	17	in	in	ADP
futech-534	76	18	high	high	ADJ
futech-534	76	19	-	-	PUNCT
futech-534	76	20	mix	mix	NOUN
futech-534	76	21	production	production	NOUN
futech-534	76	22	environments	environment	NOUN
futech-534	76	23	.	.	PUNCT
futech-534	77	1	meanwhile	meanwhile	ADV
futech-534	77	2	,	,	PUNCT
futech-534	77	3	yoon	yoon	PROPN
futech-534	77	4	and	and	CCONJ
futech-534	77	5	kim	kim	PROPN
futech-534	77	6	[	[	X
futech-534	77	7	15	15	NUM
futech-534	77	8	]	]	X
futech-534	77	9	advanced	advance	VERB
futech-534	77	10	the	the	DET
futech-534	77	11	application	application	NOUN
futech-534	77	12	of	of	ADP
futech-534	77	13	machine	machine	NOUN
futech-534	77	14	learning	learn	VERB
futech-534	77	15	to	to	PART
futech-534	77	16	wafer	wafer	VERB
futech-534	77	17	map	map	NOUN
futech-534	77	18	analysis	analysis	NOUN
futech-534	77	19	by	by	ADP
futech-534	77	20	proposing	propose	VERB
futech-534	77	21	a	a	DET
futech-534	77	22	fewshot	fewshot	ADJ
futech-534	77	23	and	and	CCONJ
futech-534	77	24	ensemble	ensemble	ADJ
futech-534	77	25	transfer	transfer	NOUN
futech-534	77	26	learning	learn	VERB
futech-534	77	27	approach	approach	NOUN
futech-534	77	28	for	for	ADP
futech-534	77	29	defect	defect	NOUN
futech-534	77	30	pattern	pattern	NOUN
futech-534	77	31	classification	classification	NOUN
futech-534	77	32	.	.	PUNCT
futech-534	78	1	their	their	PRON
futech-534	78	2	model	model	NOUN
futech-534	78	3	achieved	achieve	VERB
futech-534	78	4	high	high	ADJ
futech-534	78	5	accuracy	accuracy	NOUN
futech-534	78	6	using	use	VERB
futech-534	78	7	minimal	minimal	ADJ
futech-534	78	8	training	training	NOUN
futech-534	78	9	data	datum	NOUN
futech-534	78	10	,	,	PUNCT
futech-534	78	11	highlighting	highlight	VERB
futech-534	78	12	the	the	DET
futech-534	78	13	potential	potential	NOUN
futech-534	78	14	of	of	ADP
futech-534	78	15	transfer	transfer	NOUN
futech-534	78	16	learning	learning	NOUN
futech-534	78	17	(	(	PUNCT
futech-534	78	18	tl	tl	PROPN
futech-534	78	19	)	)	PUNCT
futech-534	78	20	for	for	ADP
futech-534	78	21	data	data	NOUN
futech-534	78	22	-	-	PUNCT
futech-534	78	23	sparse	sparse	ADJ
futech-534	78	24	semiconductor	semiconductor	NOUN
futech-534	78	25	contexts	contexts	NOUN
futech-534	78	26	.	.	PUNCT
futech-534	79	1	machine	machine	NOUN
futech-534	79	2	learning	learning	NOUN
futech-534	79	3	has	have	AUX
futech-534	79	4	also	also	ADV
futech-534	79	5	extended	extend	VERB
futech-534	79	6	beyond	beyond	ADP
futech-534	79	7	process	process	NOUN
futech-534	79	8	monitoring	monitoring	NOUN
futech-534	79	9	to	to	ADP
futech-534	79	10	adjacent	adjacent	ADJ
futech-534	79	11	manufacturing	manufacturing	NOUN
futech-534	79	12	domains	domain	NOUN
futech-534	79	13	.	.	PUNCT
futech-534	80	1	jaiswal	jaiswal	PROPN
futech-534	81	1	[	[	X
futech-534	81	2	16	16	NUM
futech-534	81	3	]	]	PUNCT
futech-534	81	4	employed	employ	VERB
futech-534	81	5	machine	machine	NOUN
futech-534	81	6	learning	learn	VERB
futech-534	81	7	to	to	PART
futech-534	81	8	optimize	optimize	VERB
futech-534	81	9	silicon	silicon	NOUN
futech-534	81	10	heterojunction	heterojunction	NOUN
futech-534	81	11	solar	solar	ADJ
futech-534	81	12	cell	cell	NOUN
futech-534	81	13	fabrication	fabrication	NOUN
futech-534	81	14	,	,	PUNCT
futech-534	81	15	illustrating	illustrate	VERB
futech-534	81	16	the	the	DET
futech-534	81	17	broader	broad	ADJ
futech-534	81	18	applicability	applicability	NOUN
futech-534	81	19	of	of	ADP
futech-534	81	20	predictive	predictive	ADJ
futech-534	81	21	models	model	NOUN
futech-534	81	22	in	in	ADP
futech-534	81	23	manufacturing	manufacturing	NOUN
futech-534	81	24	systems	system	NOUN
futech-534	81	25	characterized	characterize	VERB
futech-534	81	26	by	by	ADP
futech-534	81	27	high	high	ADJ
futech-534	81	28	process	process	NOUN
futech-534	81	29	complexity	complexity	NOUN
futech-534	81	30	.	.	PUNCT
futech-534	82	1	doinychko	doinychko	PROPN
futech-534	83	1	[	[	X
futech-534	83	2	17	17	NUM
futech-534	83	3	]	]	PUNCT
futech-534	83	4	proposed	propose	VERB
futech-534	83	5	a	a	DET
futech-534	83	6	multiview	multiview	NOUN
futech-534	83	7	learning	learn	VERB
futech-534	83	8	framework	framework	NOUN
futech-534	83	9	to	to	PART
futech-534	83	10	manage	manage	VERB
futech-534	83	11	missing	miss	VERB
futech-534	83	12	sensor	sensor	NOUN
futech-534	83	13	data	datum	NOUN
futech-534	83	14	and	and	CCONJ
futech-534	83	15	facilitate	facilitate	VERB
futech-534	83	16	cross	cross	ADJ
futech-534	83	17	-	-	NOUN
futech-534	83	18	process	process	NOUN
futech-534	83	19	modeling	modeling	NOUN
futech-534	83	20	,	,	PUNCT
futech-534	83	21	providing	provide	VERB
futech-534	83	22	theoretical	theoretical	ADJ
futech-534	83	23	support	support	NOUN
futech-534	83	24	for	for	ADP
futech-534	83	25	integrating	integrate	VERB
futech-534	83	26	heterogeneous	heterogeneous	ADJ
futech-534	83	27	process	process	NOUN
futech-534	83	28	information	information	NOUN
futech-534	83	29	.	.	PUNCT
futech-534	84	1	similarly	similarly	ADV
futech-534	84	2	,	,	PUNCT
futech-534	84	3	piedrafita	piedrafita	VERB
futech-534	84	4	acin	acin	PRON
futech-534	85	1	[	[	X
futech-534	85	2	18	18	NUM
futech-534	85	3	]	]	PUNCT
futech-534	85	4	conducted	conduct	VERB
futech-534	85	5	a	a	DET
futech-534	85	6	case	case	NOUN
futech-534	85	7	study	study	NOUN
futech-534	85	8	on	on	ADP
futech-534	85	9	semiconductor	semiconductor	NOUN
futech-534	85	10	inventory	inventory	NOUN
futech-534	85	11	demand	demand	NOUN
futech-534	85	12	forecasting	forecasting	NOUN
futech-534	85	13	using	use	VERB
futech-534	85	14	time	time	NOUN
futech-534	85	15	-	-	PUNCT
futech-534	85	16	series	series	NOUN
futech-534	85	17	machine	machine	NOUN
futech-534	85	18	learning	learning	NOUN
futech-534	85	19	methods	method	NOUN
futech-534	85	20	,	,	PUNCT
futech-534	85	21	underscoring	underscore	VERB
futech-534	85	22	the	the	DET
futech-534	85	23	value	value	NOUN
futech-534	85	24	of	of	ADP
futech-534	85	25	data	data	NOUN
futech-534	85	26	-	-	PUNCT
futech-534	85	27	driven	drive	VERB
futech-534	85	28	forecasting	forecasting	NOUN
futech-534	85	29	in	in	ADP
futech-534	85	30	upstream	upstream	ADJ
futech-534	85	31	supply	supply	NOUN
futech-534	85	32	chain	chain	NOUN
futech-534	85	33	management	management	NOUN
futech-534	85	34	.	.	PUNCT
futech-534	86	1	ka	ka	PROPN
futech-534	86	2	.	.	PROPN
futech-534	86	3	kumar	kumar	PROPN
futech-534	86	4	&	&	CCONJ
futech-534	86	5	k.	k.	PROPN
futech-534	86	6	hemachandran	hemachandran	PROPN
futech-534	86	7	/	/	SYM
futech-534	86	8	future	future	ADJ
futech-534	86	9	technology	technology	NOUN
futech-534	86	10	february	february	PROPN
futech-534	86	11	2026|	2026|	NUM
futech-534	86	12	volume	volume	NOUN
futech-534	86	13	05	05	NUM
futech-534	87	1	|	|	ADV
futech-534	87	2	issue	issue	NOUN
futech-534	87	3	01	01	NUM
futech-534	88	1	|	|	ADV
futech-534	88	2	pages	page	VERB
futech-534	88	3	55	55	NUM
futech-534	88	4	-	-	SYM
futech-534	88	5	64	64	NUM
futech-534	88	6	57	57	NUM
futech-534	88	7	2.2	2.2	NUM
futech-534	88	8	transfer	transfer	NOUN
futech-534	88	9	learning	learning	NOUN
futech-534	88	10	and	and	CCONJ
futech-534	88	11	cross	cross	ADJ
futech-534	88	12	-	-	ADJ
futech-534	88	13	fab	fab	ADJ
futech-534	88	14	adaptation	adaptation	NOUN
futech-534	88	15	the	the	DET
futech-534	88	16	heterogeneity	heterogeneity	NOUN
futech-534	88	17	of	of	ADP
futech-534	88	18	semiconductor	semiconductor	NOUN
futech-534	88	19	data	datum	NOUN
futech-534	88	20	across	across	ADP
futech-534	88	21	fabs	fab	NOUN
futech-534	88	22	and	and	CCONJ
futech-534	88	23	toolsets	toolset	NOUN
futech-534	88	24	often	often	ADV
futech-534	88	25	leads	lead	VERB
futech-534	88	26	to	to	ADP
futech-534	88	27	distributional	distributional	ADJ
futech-534	88	28	shifts	shift	NOUN
futech-534	88	29	that	that	PRON
futech-534	88	30	degrade	degrade	VERB
futech-534	88	31	the	the	DET
futech-534	88	32	performance	performance	NOUN
futech-534	88	33	of	of	ADP
futech-534	88	34	single	single	ADJ
futech-534	88	35	-	-	PUNCT
futech-534	88	36	domain	domain	NOUN
futech-534	88	37	models	model	NOUN
futech-534	88	38	.	.	PUNCT
futech-534	89	1	to	to	PART
futech-534	89	2	overcome	overcome	VERB
futech-534	89	3	this	this	PRON
futech-534	89	4	,	,	PUNCT
futech-534	89	5	researchers	researcher	NOUN
futech-534	89	6	have	have	AUX
futech-534	89	7	explored	explore	VERB
futech-534	89	8	tl	tl	PROPN
futech-534	89	9	-	-	PUNCT
futech-534	89	10	based	base	VERB
futech-534	89	11	methods	method	NOUN
futech-534	89	12	for	for	ADP
futech-534	89	13	knowledge	knowledge	NOUN
futech-534	89	14	reuse	reuse	NOUN
futech-534	89	15	.	.	PUNCT
futech-534	90	1	chien	chien	PROPN
futech-534	90	2	et	et	PROPN
futech-534	90	3	al	al	PROPN
futech-534	90	4	.	.	PUNCT
futech-534	91	1	[	[	X
futech-534	91	2	19	19	NUM
futech-534	91	3	]	]	PUNCT
futech-534	91	4	pioneered	pioneer	VERB
futech-534	91	5	the	the	DET
futech-534	91	6	use	use	NOUN
futech-534	91	7	of	of	ADP
futech-534	91	8	convolutional	convolutional	ADJ
futech-534	91	9	neural	neural	ADJ
futech-534	91	10	network	network	NOUN
futech-534	91	11	(	(	PUNCT
futech-534	91	12	cnn	cnn	PROPN
futech-534	91	13	)	)	PUNCT
futech-534	91	14	transfer	transfer	NOUN
futech-534	91	15	learning	learning	NOUN
futech-534	91	16	for	for	ADP
futech-534	91	17	intelligent	intelligent	ADJ
futech-534	91	18	fault	fault	NOUN
futech-534	91	19	detection	detection	NOUN
futech-534	91	20	,	,	PUNCT
futech-534	91	21	enabling	enable	VERB
futech-534	91	22	cross	cross	ADJ
futech-534	91	23	-	-	ADJ
futech-534	91	24	domain	domain	ADJ
futech-534	91	25	adaptation	adaptation	NOUN
futech-534	91	26	of	of	ADP
futech-534	91	27	models	model	NOUN
futech-534	91	28	for	for	ADP
futech-534	91	29	process	process	NOUN
futech-534	91	30	monitoring	monitoring	NOUN
futech-534	91	31	.	.	PUNCT
futech-534	92	1	maitra	maitra	PROPN
futech-534	92	2	et	et	PROPN
futech-534	92	3	al	al	PROPN
futech-534	92	4	.	.	PUNCT
futech-534	93	1	[	[	X
futech-534	93	2	20	20	NUM
futech-534	93	3	]	]	PUNCT
futech-534	93	4	extended	extend	VERB
futech-534	93	5	this	this	DET
futech-534	93	6	paradigm	paradigm	NOUN
futech-534	93	7	through	through	ADP
futech-534	93	8	a	a	DET
futech-534	93	9	review	review	NOUN
futech-534	93	10	of	of	ADP
futech-534	93	11	virtual	virtual	ADJ
futech-534	93	12	metrology	metrology	NOUN
futech-534	93	13	(	(	PUNCT
futech-534	93	14	vm	vm	NOUN
futech-534	93	15	)	)	PUNCT
futech-534	93	16	systems	system	NOUN
futech-534	93	17	,	,	PUNCT
futech-534	93	18	showing	show	VERB
futech-534	93	19	that	that	SCONJ
futech-534	93	20	tl	tl	PROPN
futech-534	93	21	enhances	enhance	VERB
futech-534	93	22	generalization	generalization	NOUN
futech-534	93	23	across	across	ADP
futech-534	93	24	multiple	multiple	ADJ
futech-534	93	25	metrology	metrology	NOUN
futech-534	93	26	tools	tool	NOUN
futech-534	93	27	and	and	CCONJ
futech-534	93	28	production	production	NOUN
futech-534	93	29	lines	line	NOUN
futech-534	93	30	.	.	PUNCT
futech-534	94	1	yang	yang	PROPN
futech-534	94	2	et	et	PROPN
futech-534	94	3	al	al	PROPN
futech-534	94	4	.	.	PUNCT
futech-534	95	1	[	[	X
futech-534	95	2	21	21	NUM
futech-534	95	3	]	]	X
futech-534	95	4	further	far	ADV
futech-534	95	5	improved	improve	VERB
futech-534	95	6	interpretability	interpretability	NOUN
futech-534	95	7	in	in	ADP
futech-534	95	8	cross	cross	ADJ
futech-534	95	9	-	-	ADJ
futech-534	95	10	domain	domain	ADJ
futech-534	95	11	learning	learning	NOUN
futech-534	95	12	by	by	ADP
futech-534	95	13	proposing	propose	VERB
futech-534	95	14	a	a	DET
futech-534	95	15	hierarchical	hierarchical	ADJ
futech-534	95	16	ensemble	ensemble	ADJ
futech-534	95	17	causal	causal	NOUN
futech-534	95	18	-	-	PUNCT
futech-534	95	19	structure	structure	NOUN
futech-534	95	20	-	-	PUNCT
futech-534	95	21	learning	learn	VERB
futech-534	95	22	approach	approach	NOUN
futech-534	95	23	that	that	PRON
futech-534	95	24	captures	capture	VERB
futech-534	95	25	inter	inter	ADJ
futech-534	95	26	-	-	NOUN
futech-534	95	27	process	process	NOUN
futech-534	95	28	dependencies	dependency	NOUN
futech-534	95	29	and	and	CCONJ
futech-534	95	30	causality	causality	NOUN
futech-534	95	31	in	in	ADP
futech-534	95	32	wafer	wafer	NOUN
futech-534	95	33	manufacturing	manufacturing	NOUN
futech-534	95	34	.	.	PUNCT
futech-534	96	1	complementing	complement	VERB
futech-534	96	2	these	these	DET
futech-534	96	3	efforts	effort	NOUN
futech-534	96	4	,	,	PUNCT
futech-534	96	5	bardossy	bardossy	ADJ
futech-534	96	6	and	and	CCONJ
futech-534	96	7	duckstein	duckstein	NOUN
futech-534	96	8	[	[	X
futech-534	96	9	22	22	NUM
futech-534	96	10	]	]	PUNCT
futech-534	96	11	established	establish	VERB
futech-534	96	12	fuzzy	fuzzy	ADJ
futech-534	96	13	rule	rule	NOUN
futech-534	96	14	-	-	PUNCT
futech-534	96	15	based	base	VERB
futech-534	96	16	modeling	modeling	NOUN
futech-534	96	17	principles	principle	NOUN
futech-534	96	18	that	that	PRON
futech-534	96	19	continue	continue	VERB
futech-534	96	20	to	to	PART
futech-534	96	21	influence	influence	VERB
futech-534	96	22	uncertainty	uncertainty	NOUN
futech-534	96	23	representation	representation	NOUN
futech-534	96	24	in	in	ADP
futech-534	96	25	semiconductor	semiconductor	NOUN
futech-534	96	26	processes	process	NOUN
futech-534	96	27	.	.	PUNCT
futech-534	97	1	their	their	PRON
futech-534	97	2	foundational	foundational	ADJ
futech-534	97	3	work	work	NOUN
futech-534	97	4	provided	provide	VERB
futech-534	97	5	the	the	DET
futech-534	97	6	basis	basis	NOUN
futech-534	97	7	for	for	ADP
futech-534	97	8	hybrid	hybrid	ADJ
futech-534	97	9	fuzzy	fuzzy	ADJ
futech-534	97	10	-	-	PUNCT
futech-534	97	11	deep	deep	ADJ
futech-534	97	12	frameworks	framework	NOUN
futech-534	97	13	.	.	PUNCT
futech-534	98	1	building	build	VERB
futech-534	98	2	on	on	ADP
futech-534	98	3	this	this	PRON
futech-534	98	4	,	,	PUNCT
futech-534	98	5	wang	wang	PROPN
futech-534	98	6	et	et	PROPN
futech-534	98	7	al	al	PROPN
futech-534	98	8	.	.	PUNCT
futech-534	99	1	[	[	X
futech-534	99	2	23	23	NUM
futech-534	99	3	]	]	PUNCT
futech-534	99	4	applied	apply	VERB
futech-534	99	5	a	a	DET
futech-534	99	6	fuzzy	fuzzy	ADJ
futech-534	99	7	deep	deep	ADJ
futech-534	99	8	predictive	predictive	ADJ
futech-534	99	9	analytics	analytic	NOUN
futech-534	99	10	model	model	NOUN
futech-534	99	11	to	to	PART
futech-534	99	12	enhance	enhance	VERB
futech-534	99	13	ct	ct	NUM
futech-534	99	14	-	-	PUNCT
futech-534	99	15	range	range	NOUN
futech-534	99	16	estimation	estimation	NOUN
futech-534	99	17	precision	precision	NOUN
futech-534	99	18	,	,	PUNCT
futech-534	99	19	integrating	integrate	VERB
futech-534	99	20	uncertainty	uncertainty	NOUN
futech-534	99	21	quantification	quantification	NOUN
futech-534	99	22	into	into	ADP
futech-534	99	23	forecasting	forecasting	NOUN
futech-534	99	24	.	.	PUNCT
futech-534	100	1	similarly	similarly	ADV
futech-534	100	2	,	,	PUNCT
futech-534	100	3	alizadeh	alizadeh	NOUN
futech-534	100	4	and	and	CCONJ
futech-534	100	5	ma	ma	PROPN
futech-534	101	1	[	[	X
futech-534	101	2	24	24	NUM
futech-534	101	3	]	]	PUNCT
futech-534	101	4	compared	compare	VERB
futech-534	101	5	hybrid	hybrid	ADJ
futech-534	101	6	metaheuristic	metaheuristic	ADJ
futech-534	101	7	optimization	optimization	NOUN
futech-534	101	8	methods	method	NOUN
futech-534	101	9	and	and	CCONJ
futech-534	101	10	concluded	conclude	VERB
futech-534	101	11	that	that	SCONJ
futech-534	101	12	efficient	efficient	ADJ
futech-534	101	13	hyperparameter	hyperparameter	NOUN
futech-534	101	14	selection	selection	NOUN
futech-534	101	15	significantly	significantly	ADV
futech-534	101	16	enhances	enhance	VERB
futech-534	101	17	predictive	predictive	ADJ
futech-534	101	18	model	model	NOUN
futech-534	101	19	performance	performance	NOUN
futech-534	101	20	and	and	CCONJ
futech-534	101	21	convergence	convergence	NOUN
futech-534	101	22	in	in	ADP
futech-534	101	23	industrial	industrial	ADJ
futech-534	101	24	environments	environment	NOUN
futech-534	101	25	.	.	PUNCT
futech-534	102	1	2.3	2.3	NUM
futech-534	102	2	hyperparameter	hyperparameter	NOUN
futech-534	102	3	optimization	optimization	NOUN
futech-534	102	4	and	and	CCONJ
futech-534	102	5	federated	federated	ADJ
futech-534	102	6	learning	learn	VERB
futech-534	102	7	the	the	DET
futech-534	102	8	increasing	increase	VERB
futech-534	102	9	scale	scale	NOUN
futech-534	102	10	and	and	CCONJ
futech-534	102	11	depth	depth	NOUN
futech-534	102	12	of	of	ADP
futech-534	102	13	deep	deep	ADJ
futech-534	102	14	learning	learning	NOUN
futech-534	102	15	models	model	NOUN
futech-534	102	16	necessitate	necessitate	ADJ
futech-534	102	17	effective	effective	ADJ
futech-534	102	18	hyperparameter	hyperparameter	NOUN
futech-534	102	19	optimization	optimization	NOUN
futech-534	102	20	(	(	PUNCT
futech-534	102	21	hpo	hpo	PROPN
futech-534	102	22	)	)	PUNCT
futech-534	102	23	techniques	technique	NOUN
futech-534	102	24	to	to	PART
futech-534	102	25	achieve	achieve	VERB
futech-534	102	26	generalization	generalization	NOUN
futech-534	102	27	and	and	CCONJ
futech-534	102	28	avoid	avoid	VERB
futech-534	102	29	overfitting	overfitte	VERB
futech-534	102	30	.	.	PUNCT
futech-534	103	1	patel	patel	PROPN
futech-534	103	2	et	et	PROPN
futech-534	103	3	al	al	PROPN
futech-534	103	4	.	.	PUNCT
futech-534	104	1	[	[	X
futech-534	104	2	25	25	NUM
futech-534	104	3	]	]	PUNCT
futech-534	104	4	developed	develop	VERB
futech-534	104	5	a	a	DET
futech-534	104	6	federated	federated	ADJ
futech-534	104	7	learning	learn	VERB
futech-534	104	8	architecture	architecture	NOUN
futech-534	104	9	that	that	PRON
futech-534	104	10	allows	allow	VERB
futech-534	104	11	distributed	distributed	ADJ
futech-534	104	12	model	model	NOUN
futech-534	104	13	training	training	NOUN
futech-534	104	14	across	across	ADP
futech-534	104	15	semiconductor	semiconductor	NOUN
futech-534	104	16	fabs	fab	NOUN
futech-534	104	17	while	while	SCONJ
futech-534	104	18	maintaining	maintain	VERB
futech-534	104	19	data	data	NOUN
futech-534	104	20	privacy	privacy	NOUN
futech-534	104	21	and	and	CCONJ
futech-534	104	22	interpretability	interpretability	NOUN
futech-534	104	23	.	.	PUNCT
futech-534	105	1	their	their	PRON
futech-534	105	2	explainable	explainable	ADJ
futech-534	105	3	-	-	PUNCT
futech-534	105	4	ai	ai	NOUN
futech-534	105	5	framework	framework	NOUN
futech-534	105	6	demonstrated	demonstrate	VERB
futech-534	105	7	that	that	SCONJ
futech-534	105	8	decentralized	decentralize	VERB
futech-534	105	9	optimization	optimization	NOUN
futech-534	105	10	can	can	AUX
futech-534	105	11	retain	retain	VERB
futech-534	105	12	predictive	predictive	ADJ
futech-534	105	13	accuracy	accuracy	NOUN
futech-534	105	14	comparable	comparable	ADJ
futech-534	105	15	to	to	ADP
futech-534	105	16	centralized	centralized	ADJ
futech-534	105	17	approaches	approach	NOUN
futech-534	105	18	.	.	PUNCT
futech-534	106	1	tin	tin	NOUN
futech-534	106	2	et	et	PROPN
futech-534	106	3	al	al	PROPN
futech-534	106	4	.	.	PUNCT
futech-534	107	1	[	[	X
futech-534	107	2	26	26	NUM
futech-534	107	3	]	]	PUNCT
futech-534	107	4	later	later	ADV
futech-534	107	5	implemented	implement	VERB
futech-534	107	6	a	a	DET
futech-534	107	7	deep	deep	ADJ
futech-534	107	8	learning	learning	NOUN
futech-534	107	9	-	-	PUNCT
futech-534	107	10	based	base	VERB
futech-534	107	11	virtual	virtual	ADJ
futech-534	107	12	metrology	metrology	NOUN
futech-534	107	13	model	model	NOUN
futech-534	107	14	within	within	ADP
futech-534	107	15	foundry	foundry	NOUN
futech-534	107	16	operations	operation	NOUN
futech-534	107	17	and	and	CCONJ
futech-534	107	18	highlighted	highlight	VERB
futech-534	107	19	the	the	DET
futech-534	107	20	importance	importance	NOUN
futech-534	107	21	of	of	ADP
futech-534	107	22	hyperparameter	hyperparameter	NOUN
futech-534	107	23	calibration	calibration	NOUN
futech-534	107	24	to	to	PART
futech-534	107	25	improve	improve	VERB
futech-534	107	26	measurement	measurement	NOUN
futech-534	107	27	prediction	prediction	NOUN
futech-534	107	28	accuracy	accuracy	NOUN
futech-534	107	29	across	across	ADP
futech-534	107	30	toolsets	toolset	NOUN
futech-534	107	31	.	.	PUNCT
futech-534	108	1	lee	lee	PROPN
futech-534	108	2	and	and	CCONJ
futech-534	108	3	gao	gao	PROPN
futech-534	109	1	[	[	X
futech-534	109	2	27	27	NUM
futech-534	109	3	]	]	PUNCT
futech-534	109	4	contributed	contribute	VERB
futech-534	109	5	a	a	DET
futech-534	109	6	hybrid	hybrid	ADJ
futech-534	109	7	fuzzy	fuzzy	ADJ
futech-534	109	8	c	c	NOUN
futech-534	109	9	-	-	PUNCT
futech-534	109	10	means	mean	NOUN
futech-534	109	11	and	and	CCONJ
futech-534	109	12	genetic	genetic	ADJ
futech-534	109	13	algorithm	algorithm	NOUN
futech-534	109	14	model	model	NOUN
futech-534	109	15	integrated	integrate	VERB
futech-534	109	16	with	with	ADP
futech-534	109	17	machine	machine	NOUN
futech-534	109	18	learning	learning	NOUN
futech-534	109	19	for	for	ADP
futech-534	109	20	job	job	NOUN
futech-534	109	21	ct	ct	PROPN
futech-534	109	22	prediction	prediction	NOUN
futech-534	109	23	,	,	PUNCT
futech-534	109	24	revealing	reveal	VERB
futech-534	109	25	that	that	SCONJ
futech-534	109	26	evolutionary	evolutionary	ADJ
futech-534	109	27	search	search	NOUN
futech-534	109	28	strategies	strategy	NOUN
futech-534	109	29	enhance	enhance	VERB
futech-534	109	30	model	model	NOUN
futech-534	109	31	adaptability	adaptability	NOUN
futech-534	109	32	.	.	PUNCT
futech-534	110	1	extending	extend	VERB
futech-534	110	2	this	this	DET
futech-534	110	3	idea	idea	NOUN
futech-534	110	4	,	,	PUNCT
futech-534	110	5	wang	wang	PROPN
futech-534	110	6	et	et	PROPN
futech-534	110	7	al	al	AUX
futech-534	110	8	.	.	PUNCT
futech-534	111	1	[	[	X
futech-534	111	2	28	28	NUM
futech-534	111	3	]	]	PUNCT
futech-534	111	4	introduced	introduce	VERB
futech-534	111	5	a	a	DET
futech-534	111	6	hierarchical	hierarchical	ADJ
futech-534	111	7	transfer	transfer	NOUN
futech-534	111	8	learning	learn	VERB
futech-534	111	9	architecture	architecture	NOUN
futech-534	111	10	for	for	ADP
futech-534	111	11	wafer	wafer	NOUN
futech-534	111	12	ct	ct	PROPN
futech-534	111	13	forecasting	forecasting	NOUN
futech-534	111	14	,	,	PUNCT
futech-534	111	15	which	which	PRON
futech-534	111	16	adapts	adapt	VERB
futech-534	111	17	pretrained	pretraine	VERB
futech-534	111	18	models	model	NOUN
futech-534	111	19	to	to	ADP
futech-534	111	20	different	different	ADJ
futech-534	111	21	wip	wip	NOUN
futech-534	111	22	regimes	regime	NOUN
futech-534	111	23	and	and	CCONJ
futech-534	111	24	production	production	NOUN
futech-534	111	25	lines	line	NOUN
futech-534	111	26	,	,	PUNCT
futech-534	111	27	resulting	result	VERB
futech-534	111	28	in	in	ADP
futech-534	111	29	substantial	substantial	ADJ
futech-534	111	30	accuracy	accuracy	NOUN
futech-534	111	31	improvements	improvement	NOUN
futech-534	111	32	.	.	PUNCT
futech-534	112	1	schelthoff	schelthoff	NOUN
futech-534	112	2	et	et	PROPN
futech-534	112	3	al	al	PROPN
futech-534	112	4	.	.	PUNCT
futech-534	113	1	[	[	X
futech-534	113	2	29	29	NUM
futech-534	113	3	]	]	X
futech-534	113	4	focused	focus	VERB
futech-534	113	5	on	on	ADP
futech-534	113	6	feature	feature	NOUN
futech-534	113	7	selection	selection	NOUN
futech-534	113	8	and	and	CCONJ
futech-534	113	9	parameter	parameter	NOUN
futech-534	113	10	optimization	optimization	NOUN
futech-534	113	11	for	for	ADP
futech-534	113	12	waiting	wait	VERB
futech-534	113	13	-	-	PUNCT
futech-534	113	14	time	time	NOUN
futech-534	113	15	prediction	prediction	NOUN
futech-534	113	16	,	,	PUNCT
futech-534	113	17	emphasizing	emphasize	VERB
futech-534	113	18	that	that	SCONJ
futech-534	113	19	combining	combine	VERB
futech-534	113	20	dimensionality	dimensionality	NOUN
futech-534	113	21	reduction	reduction	NOUN
futech-534	113	22	with	with	ADP
futech-534	113	23	automated	automate	VERB
futech-534	113	24	tuning	tuning	NOUN
futech-534	113	25	significantly	significantly	ADV
futech-534	113	26	enhances	enhance	VERB
futech-534	113	27	interpretability	interpretability	NOUN
futech-534	113	28	.	.	PUNCT
futech-534	114	1	in	in	ADP
futech-534	114	2	parallel	parallel	NOUN
futech-534	114	3	,	,	PUNCT
futech-534	114	4	tchatchoua	tchatchoua	ADV
futech-534	114	5	et	et	PROPN
futech-534	114	6	al	al	PROPN
futech-534	114	7	.	.	PUNCT
futech-534	115	1	[	[	X
futech-534	115	2	30	30	NUM
futech-534	115	3	]	]	PUNCT
futech-534	115	4	proposed	propose	VERB
futech-534	115	5	a	a	DET
futech-534	115	6	1d	1d	NUM
futech-534	115	7	-	-	PUNCT
futech-534	115	8	resnet	resnet	NOUN
futech-534	115	9	architecture	architecture	NOUN
futech-534	115	10	for	for	ADP
futech-534	115	11	multivariate	multivariate	NOUN
futech-534	115	12	fault	fault	NOUN
futech-534	115	13	detection	detection	NOUN
futech-534	115	14	,	,	PUNCT
futech-534	115	15	demonstrating	demonstrate	VERB
futech-534	115	16	improved	improve	VERB
futech-534	115	17	anomaly	anomaly	NOUN
futech-534	115	18	localization	localization	NOUN
futech-534	115	19	and	and	CCONJ
futech-534	115	20	early	early	ADJ
futech-534	115	21	detection	detection	NOUN
futech-534	115	22	capabilities	capability	NOUN
futech-534	115	23	in	in	ADP
futech-534	115	24	complex	complex	ADJ
futech-534	115	25	semiconductor	semiconductor	NOUN
futech-534	115	26	equipment	equipment	NOUN
futech-534	115	27	.	.	PUNCT
futech-534	116	1	2.4	2.4	NUM
futech-534	116	2	emerging	emerge	VERB
futech-534	116	3	trends	trend	NOUN
futech-534	116	4	and	and	CCONJ
futech-534	116	5	research	research	NOUN
futech-534	116	6	gaps	gap	VERB
futech-534	116	7	the	the	DET
futech-534	116	8	trajectory	trajectory	NOUN
futech-534	116	9	of	of	ADP
futech-534	116	10	research	research	NOUN
futech-534	116	11	from	from	ADP
futech-534	116	12	ref	ref	NOUN
futech-534	116	13	[	[	X
futech-534	116	14	13	13	NUM
futech-534	116	15	]	]	PUNCT
futech-534	116	16	through	through	ADP
futech-534	116	17	ref	ref	NOUN
futech-534	116	18	[	[	X
futech-534	116	19	30	30	NUM
futech-534	116	20	]	]	PUNCT
futech-534	116	21	reflects	reflect	VERB
futech-534	116	22	a	a	DET
futech-534	116	23	consistent	consistent	ADJ
futech-534	116	24	progression	progression	NOUN
futech-534	116	25	from	from	ADP
futech-534	116	26	traditional	traditional	ADJ
futech-534	116	27	data	data	NOUN
futech-534	116	28	-	-	PUNCT
futech-534	116	29	mining	mining	NOUN
futech-534	116	30	models	model	NOUN
futech-534	116	31	toward	toward	ADP
futech-534	116	32	intelligent	intelligent	ADJ
futech-534	116	33	,	,	PUNCT
futech-534	116	34	scalable	scalable	ADJ
futech-534	116	35	,	,	PUNCT
futech-534	116	36	and	and	CCONJ
futech-534	116	37	interpretable	interpretable	ADJ
futech-534	116	38	ai	ai	PROPN
futech-534	116	39	systems	system	NOUN
futech-534	116	40	for	for	ADP
futech-534	116	41	semiconductor	semiconductor	NOUN
futech-534	116	42	manufacturing	manufacturing	NOUN
futech-534	116	43	.	.	PUNCT
futech-534	117	1	early	early	ADJ
futech-534	117	2	studies	study	NOUN
futech-534	117	3	established	establish	VERB
futech-534	117	4	the	the	DET
futech-534	117	5	significance	significance	NOUN
futech-534	117	6	of	of	ADP
futech-534	117	7	data	data	NOUN
futech-534	117	8	-	-	PUNCT
futech-534	117	9	driven	drive	VERB
futech-534	117	10	modeling	modeling	NOUN
futech-534	117	11	[	[	X
futech-534	117	12	13	13	NUM
futech-534	117	13	]	]	PUNCT
futech-534	117	14	,	,	PUNCT
futech-534	117	15	while	while	SCONJ
futech-534	117	16	dynamic	dynamic	ADJ
futech-534	117	17	scheduling	scheduling	NOUN
futech-534	117	18	[	[	X
futech-534	117	19	14	14	NUM
futech-534	117	20	]	]	PUNCT
futech-534	117	21	and	and	CCONJ
futech-534	117	22	few	few	ADJ
futech-534	117	23	-	-	PUNCT
futech-534	117	24	shot	shot	NOUN
futech-534	117	25	transfer	transfer	NOUN
futech-534	117	26	learning	learning	NOUN
futech-534	117	27	[	[	X
futech-534	117	28	15	15	NUM
futech-534	117	29	]	]	X
futech-534	117	30	extended	extended	ADJ
futech-534	117	31	adaptability	adaptability	NOUN
futech-534	117	32	under	under	ADP
futech-534	117	33	changing	change	VERB
futech-534	117	34	operational	operational	ADJ
futech-534	117	35	conditions	condition	NOUN
futech-534	117	36	.	.	PUNCT
futech-534	118	1	more	more	ADJ
futech-534	118	2	recent	recent	ADJ
futech-534	118	3	works	work	NOUN
futech-534	118	4	have	have	AUX
futech-534	118	5	merged	merge	VERB
futech-534	118	6	cross	cross	ADJ
futech-534	118	7	-	-	ADJ
futech-534	118	8	domain	domain	ADJ
futech-534	118	9	knowledge	knowledge	NOUN
futech-534	118	10	transfer	transfer	NOUN
futech-534	118	11	[	[	X
futech-534	118	12	19,21	19,21	NUM
futech-534	118	13	]	]	PUNCT
futech-534	118	14	and	and	CCONJ
futech-534	118	15	federated	federate	VERB
futech-534	118	16	intelligence	intelligence	NOUN
futech-534	118	17	[	[	X
futech-534	118	18	25	25	NUM
futech-534	118	19	]	]	PUNCT
futech-534	118	20	with	with	ADP
futech-534	118	21	advanced	advanced	ADJ
futech-534	118	22	hyperparameter	hyperparameter	NOUN
futech-534	118	23	optimization	optimization	NOUN
futech-534	118	24	[	[	X
futech-534	118	25	24,29	24,29	NUM
futech-534	118	26	]	]	PUNCT
futech-534	118	27	,	,	PUNCT
futech-534	118	28	enabling	enable	VERB
futech-534	118	29	greater	great	ADJ
futech-534	118	30	automation	automation	NOUN
futech-534	118	31	and	and	CCONJ
futech-534	118	32	scalability	scalability	NOUN
futech-534	118	33	in	in	ADP
futech-534	118	34	forecasting	forecast	VERB
futech-534	118	35	pipelines	pipeline	NOUN
futech-534	118	36	.	.	PUNCT
futech-534	119	1	despite	despite	SCONJ
futech-534	119	2	this	this	DET
futech-534	119	3	progress	progress	NOUN
futech-534	119	4	,	,	PUNCT
futech-534	119	5	key	key	ADJ
futech-534	119	6	research	research	NOUN
futech-534	119	7	gaps	gap	NOUN
futech-534	119	8	remain	remain	VERB
futech-534	119	9	.	.	PUNCT
futech-534	120	1	most	most	ADJ
futech-534	120	2	existing	exist	VERB
futech-534	120	3	studies	study	NOUN
futech-534	120	4	optimize	optimize	VERB
futech-534	120	5	either	either	DET
futech-534	120	6	prediction	prediction	NOUN
futech-534	120	7	accuracy	accuracy	NOUN
futech-534	120	8	or	or	CCONJ
futech-534	120	9	adaptability	adaptability	NOUN
futech-534	120	10	but	but	CCONJ
futech-534	120	11	rarely	rarely	ADV
futech-534	120	12	address	address	VERB
futech-534	120	13	both	both	PRON
futech-534	120	14	simultaneously	simultaneously	ADV
futech-534	120	15	.	.	PUNCT
futech-534	121	1	additionally	additionally	ADV
futech-534	121	2	,	,	PUNCT
futech-534	121	3	while	while	SCONJ
futech-534	121	4	tl	tl	PROPN
futech-534	121	5	and	and	CCONJ
futech-534	121	6	fuzzy	fuzzy	ADJ
futech-534	121	7	logic	logic	NOUN
futech-534	121	8	enhance	enhance	VERB
futech-534	121	9	interpretability	interpretability	NOUN
futech-534	121	10	,	,	PUNCT
futech-534	121	11	their	their	PRON
futech-534	121	12	integration	integration	NOUN
futech-534	121	13	with	with	ADP
futech-534	121	14	automated	automate	VERB
futech-534	121	15	hpo	hpo	PROPN
futech-534	121	16	methods	method	NOUN
futech-534	121	17	is	be	AUX
futech-534	121	18	limited	limited	ADJ
futech-534	121	19	.	.	PUNCT
futech-534	122	1	these	these	DET
futech-534	122	2	gaps	gap	NOUN
futech-534	122	3	motivate	motivate	VERB
futech-534	122	4	the	the	DET
futech-534	122	5	development	development	NOUN
futech-534	122	6	of	of	ADP
futech-534	122	7	a	a	DET
futech-534	122	8	hierarchical	hierarchical	ADJ
futech-534	122	9	transfer	transfer	NOUN
futech-534	122	10	learning	learning	NOUN
futech-534	122	11	and	and	CCONJ
futech-534	122	12	hyperparameter	hyperparameter	NOUN
futech-534	122	13	optimization	optimization	NOUN
futech-534	122	14	(	(	PUNCT
futech-534	122	15	htl	htl	PROPN
futech-534	122	16	-	-	PUNCT
futech-534	122	17	hpo	hpo	PROPN
futech-534	122	18	)	)	PUNCT
futech-534	122	19	framework	framework	NOUN
futech-534	122	20	that	that	PRON
futech-534	122	21	unifies	unify	VERB
futech-534	122	22	crossdomain	crossdomain	ADJ
futech-534	122	23	adaptability	adaptability	NOUN
futech-534	122	24	with	with	ADP
futech-534	122	25	probabilistic	probabilistic	ADJ
futech-534	122	26	optimization	optimization	NOUN
futech-534	122	27	to	to	PART
futech-534	122	28	achieve	achieve	VERB
futech-534	122	29	accurate	accurate	ADJ
futech-534	122	30	,	,	PUNCT
futech-534	122	31	efficient	efficient	ADJ
futech-534	122	32	,	,	PUNCT
futech-534	122	33	and	and	CCONJ
futech-534	122	34	explainable	explainable	ADJ
futech-534	122	35	cycle	cycle	NOUN
futech-534	122	36	-	-	PUNCT
futech-534	122	37	time	time	NOUN
futech-534	122	38	forecasting	forecasting	NOUN
futech-534	122	39	across	across	ADP
futech-534	122	40	heterogeneous	heterogeneous	ADJ
futech-534	122	41	fabs	fab	NOUN
futech-534	122	42	.	.	PUNCT
futech-534	123	1	3	3	X
futech-534	123	2	.	.	X
futech-534	123	3	methodology	methodology	NOUN
futech-534	123	4	this	this	DET
futech-534	123	5	study	study	NOUN
futech-534	123	6	develops	develop	VERB
futech-534	123	7	an	an	DET
futech-534	123	8	optimized	optimize	VERB
futech-534	123	9	hierarchical	hierarchical	ADJ
futech-534	123	10	transfer	transfer	NOUN
futech-534	123	11	learning	learn	VERB
futech-534	123	12	framework	framework	NOUN
futech-534	123	13	integrated	integrate	VERB
futech-534	123	14	with	with	ADP
futech-534	123	15	hyperparameter	hyperparameter	NOUN
futech-534	123	16	optimization	optimization	NOUN
futech-534	123	17	(	(	PUNCT
futech-534	123	18	htl	htl	PROPN
futech-534	123	19	-	-	PUNCT
futech-534	123	20	hpo	hpo	PROPN
futech-534	123	21	)	)	PUNCT
futech-534	123	22	to	to	PART
futech-534	123	23	enhance	enhance	VERB
futech-534	123	24	cycle	cycle	NOUN
futech-534	123	25	-	-	PUNCT
futech-534	123	26	time	time	NOUN
futech-534	123	27	forecasting	forecasting	NOUN
futech-534	123	28	in	in	ADP
futech-534	123	29	semiconductor	semiconductor	NOUN
futech-534	123	30	wafer	wafer	NOUN
futech-534	123	31	fabrication	fabrication	NOUN
futech-534	123	32	.	.	PUNCT
futech-534	124	1	the	the	DET
futech-534	124	2	following	follow	VERB
futech-534	124	3	section	section	NOUN
futech-534	124	4	details	detail	VERB
futech-534	124	5	the	the	DET
futech-534	124	6	research	research	NOUN
futech-534	124	7	design	design	NOUN
futech-534	124	8	,	,	PUNCT
futech-534	124	9	data	datum	NOUN
futech-534	124	10	collection	collection	NOUN
futech-534	124	11	process	process	NOUN
futech-534	124	12	,	,	PUNCT
futech-534	124	13	population	population	NOUN
futech-534	124	14	and	and	CCONJ
futech-534	124	15	sampling	sample	VERB
futech-534	124	16	,	,	PUNCT
futech-534	124	17	analytical	analytical	ADJ
futech-534	124	18	approach	approach	NOUN
futech-534	124	19	,	,	PUNCT
futech-534	124	20	and	and	CCONJ
futech-534	124	21	ethical	ethical	ADJ
futech-534	124	22	considerations	consideration	NOUN
futech-534	124	23	.	.	PUNCT
futech-534	125	1	it	it	PRON
futech-534	125	2	also	also	ADV
futech-534	125	3	elaborates	elaborate	VERB
futech-534	125	4	on	on	ADP
futech-534	125	5	the	the	DET
futech-534	125	6	implementation	implementation	NOUN
futech-534	125	7	of	of	ADP
futech-534	125	8	hierarchical	hierarchical	ADJ
futech-534	125	9	transfer	transfer	NOUN
futech-534	125	10	learning	learning	NOUN
futech-534	125	11	and	and	CCONJ
futech-534	125	12	optimization	optimization	NOUN
futech-534	125	13	procedures	procedure	NOUN
futech-534	125	14	.	.	PUNCT
futech-534	126	1	3.1	3.1	NUM
futech-534	126	2	research	research	NOUN
futech-534	126	3	design	design	NOUN
futech-534	126	4	a	a	DET
futech-534	126	5	quantitative	quantitative	ADJ
futech-534	126	6	experimental	experimental	ADJ
futech-534	126	7	design	design	NOUN
futech-534	126	8	was	be	AUX
futech-534	126	9	adopted	adopt	VERB
futech-534	126	10	to	to	PART
futech-534	126	11	evaluate	evaluate	VERB
futech-534	126	12	the	the	DET
futech-534	126	13	effectiveness	effectiveness	NOUN
futech-534	126	14	of	of	ADP
futech-534	126	15	the	the	DET
futech-534	126	16	proposed	propose	VERB
futech-534	126	17	htl	htl	PROPN
futech-534	126	18	-	-	PUNCT
futech-534	126	19	hpo	hpo	PROPN
futech-534	126	20	framework	framework	NOUN
futech-534	126	21	.	.	PUNCT
futech-534	127	1	the	the	DET
futech-534	127	2	design	design	NOUN
futech-534	127	3	combines	combine	VERB
futech-534	127	4	computational	computational	ADJ
futech-534	127	5	modeling	modeling	NOUN
futech-534	127	6	,	,	PUNCT
futech-534	127	7	machine	machine	NOUN
futech-534	127	8	learning	learn	VERB
futech-534	127	9	experimentation	experimentation	NOUN
futech-534	127	10	,	,	PUNCT
futech-534	127	11	and	and	CCONJ
futech-534	127	12	statistical	statistical	ADJ
futech-534	127	13	validation	validation	NOUN
futech-534	127	14	to	to	PART
futech-534	127	15	ensure	ensure	VERB
futech-534	127	16	both	both	CCONJ
futech-534	127	17	predictive	predictive	ADJ
futech-534	127	18	and	and	CCONJ
futech-534	127	19	inferential	inferential	ADJ
futech-534	127	20	accuracy	accuracy	NOUN
futech-534	127	21	.	.	PUNCT
futech-534	128	1	this	this	DET
futech-534	128	2	study	study	NOUN
futech-534	128	3	follows	follow	VERB
futech-534	128	4	a	a	DET
futech-534	128	5	deductive	deductive	ADJ
futech-534	128	6	approach	approach	NOUN
futech-534	128	7	,	,	PUNCT
futech-534	128	8	moving	move	VERB
futech-534	128	9	from	from	ADP
futech-534	128	10	theoretical	theoretical	ADJ
futech-534	128	11	assumptions	assumption	NOUN
futech-534	128	12	about	about	ADP
futech-534	128	13	transfer	transfer	NOUN
futech-534	128	14	learning	learning	NOUN
futech-534	128	15	and	and	CCONJ
futech-534	128	16	hyperparameter	hyperparameter	NOUN
futech-534	128	17	optimization	optimization	NOUN
futech-534	128	18	to	to	AUX
futech-534	128	19	empirical	empirical	ADJ
futech-534	128	20	verification	verification	NOUN
futech-534	128	21	through	through	ADP
futech-534	128	22	real	real	ADJ
futech-534	128	23	semiconductor	semiconductor	NOUN
futech-534	128	24	data	datum	NOUN
futech-534	128	25	.	.	PUNCT
futech-534	129	1	the	the	DET
futech-534	129	2	experimental	experimental	ADJ
futech-534	129	3	workflow	workflow	NOUN
futech-534	129	4	consists	consist	VERB
futech-534	129	5	of	of	ADP
futech-534	129	6	four	four	NUM
futech-534	129	7	stages	stage	NOUN
futech-534	129	8	:	:	PUNCT
futech-534	129	9	•	•	ADP
futech-534	129	10	designing	design	VERB
futech-534	129	11	and	and	CCONJ
futech-534	129	12	implementing	implement	VERB
futech-534	129	13	the	the	DET
futech-534	129	14	htl	htl	PROPN
futech-534	129	15	-	-	PUNCT
futech-534	129	16	hpo	hpo	PROPN
futech-534	129	17	architecture	architecture	NOUN
futech-534	129	18	;	;	PUNCT
futech-534	129	19	•	•	CCONJ
futech-534	129	20	collecting	collect	VERB
futech-534	129	21	and	and	CCONJ
futech-534	129	22	preprocessing	preprocesse	VERB
futech-534	129	23	semiconductor	semiconductor	NOUN
futech-534	129	24	fabrication	fabrication	NOUN
futech-534	129	25	data	datum	NOUN
futech-534	129	26	;	;	PUNCT
futech-534	129	27	•	•	NUM
futech-534	129	28	training	training	NOUN
futech-534	129	29	,	,	PUNCT
futech-534	129	30	validating	validate	VERB
futech-534	129	31	,	,	PUNCT
futech-534	129	32	and	and	CCONJ
futech-534	129	33	optimizing	optimize	VERB
futech-534	129	34	models	model	NOUN
futech-534	129	35	using	use	VERB
futech-534	129	36	transferlearning	transferlearne	VERB
futech-534	129	37	hierarchies	hierarchy	NOUN
futech-534	129	38	;	;	PUNCT
futech-534	129	39	•	•	NUM
futech-534	129	40	statistically	statistically	ADV
futech-534	129	41	validating	validate	VERB
futech-534	129	42	model	model	NOUN
futech-534	129	43	performance	performance	NOUN
futech-534	129	44	through	through	ADP
futech-534	129	45	comparative	comparative	ADJ
futech-534	129	46	analysis	analysis	NOUN
futech-534	129	47	and	and	CCONJ
futech-534	129	48	t	t	NOUN
futech-534	129	49	-	-	PUNCT
futech-534	129	50	tests	test	NOUN
futech-534	129	51	.	.	PUNCT
futech-534	130	1	•	•	NOUN
futech-534	130	2	this	this	DET
futech-534	130	3	design	design	NOUN
futech-534	130	4	ensures	ensure	VERB
futech-534	130	5	rigor	rigor	NOUN
futech-534	130	6	,	,	PUNCT
futech-534	130	7	replicability	replicability	NOUN
futech-534	130	8	,	,	PUNCT
futech-534	130	9	and	and	CCONJ
futech-534	130	10	scientific	scientific	ADJ
futech-534	130	11	validity	validity	NOUN
futech-534	130	12	aligned	align	VERB
futech-534	130	13	with	with	ADP
futech-534	130	14	ieee	ieee	NOUN
futech-534	130	15	research	research	NOUN
futech-534	130	16	standards	standard	NOUN
futech-534	130	17	.	.	PUNCT
futech-534	131	1	3.2	3.2	NUM
futech-534	131	2	data	datum	NOUN
futech-534	131	3	collection	collection	NOUN
futech-534	131	4	method	method	NOUN
futech-534	131	5	the	the	DET
futech-534	131	6	dataset	dataset	NOUN
futech-534	131	7	used	use	VERB
futech-534	131	8	in	in	ADP
futech-534	131	9	this	this	DET
futech-534	131	10	research	research	NOUN
futech-534	131	11	was	be	AUX
futech-534	131	12	derived	derive	VERB
futech-534	131	13	from	from	ADP
futech-534	131	14	the	the	DET
futech-534	131	15	publicly	publicly	ADV
futech-534	131	16	available	available	ADJ
futech-534	131	17	data	datum	NOUN
futech-534	131	18	presented	present	VERB
futech-534	131	19	by	by	ADP
futech-534	131	20	tchatchoua	tchatchoua	PROPN
futech-534	131	21	et	et	PROPN
futech-534	131	22	al	al	PROPN
futech-534	131	23	.	.	PUNCT
futech-534	132	1	[	[	X
futech-534	132	2	30	30	NUM
futech-534	132	3	]	]	PUNCT
futech-534	132	4	,	,	PUNCT
futech-534	132	5	which	which	PRON
futech-534	132	6	originates	originate	VERB
futech-534	132	7	from	from	ADP
futech-534	132	8	semiconductor	semiconductor	NOUN
futech-534	132	9	manufacturing	manufacturing	NOUN
futech-534	132	10	equipment	equipment	NOUN
futech-534	132	11	fault	fault	NOUN
futech-534	132	12	-	-	PUNCT
futech-534	132	13	detection	detection	NOUN
futech-534	132	14	experiments	experiment	NOUN
futech-534	132	15	.	.	PUNCT
futech-534	133	1	this	this	DET
futech-534	133	2	dataset	dataset	NOUN
futech-534	133	3	was	be	AUX
futech-534	133	4	chosen	choose	VERB
futech-534	133	5	because	because	SCONJ
futech-534	133	6	it	it	PRON
futech-534	133	7	provides	provide	VERB
futech-534	133	8	multivariate	multivariate	NOUN
futech-534	133	9	time	time	NOUN
futech-534	133	10	-	-	PUNCT
futech-534	133	11	series	series	NOUN
futech-534	133	12	process	process	NOUN
futech-534	133	13	variables	variable	NOUN
futech-534	133	14	representative	representative	NOUN
futech-534	133	15	of	of	ADP
futech-534	133	16	real	real	ADJ
futech-534	133	17	wafer	wafer	NOUN
futech-534	133	18	fabrication	fabrication	NOUN
futech-534	133	19	conditions	condition	NOUN
futech-534	133	20	,	,	PUNCT
futech-534	133	21	ensuring	ensure	VERB
futech-534	133	22	ecological	ecological	ADJ
futech-534	133	23	validity	validity	NOUN
futech-534	133	24	and	and	CCONJ
futech-534	133	25	domain	domain	NOUN
futech-534	133	26	relevance	relevance	NOUN
futech-534	133	27	.	.	PUNCT
futech-534	134	1	the	the	DET
futech-534	134	2	data	datum	NOUN
futech-534	134	3	comprise	comprise	VERB
futech-534	134	4	readings	reading	NOUN
futech-534	134	5	collected	collect	VERB
futech-534	134	6	from	from	ADP
futech-534	134	7	equipment	equipment	NOUN
futech-534	134	8	sensors	sensor	NOUN
futech-534	134	9	within	within	ADP
futech-534	134	10	semiconductor	semiconductor	NOUN
futech-534	134	11	fabrication	fabrication	NOUN
futech-534	134	12	environments	environment	NOUN
futech-534	134	13	,	,	PUNCT
futech-534	134	14	including	include	VERB
futech-534	134	15	temperature	temperature	NOUN
futech-534	134	16	,	,	PUNCT
futech-534	134	17	pressure	pressure	NOUN
futech-534	134	18	,	,	PUNCT
futech-534	134	19	flow	flow	NOUN
futech-534	134	20	rate	rate	NOUN
futech-534	134	21	,	,	PUNCT
futech-534	134	22	and	and	CCONJ
futech-534	134	23	vibration	vibration	NOUN
futech-534	134	24	signatures	signature	NOUN
futech-534	134	25	,	,	PUNCT
futech-534	134	26	along	along	ADP
futech-534	134	27	with	with	ADP
futech-534	134	28	operational	operational	ADJ
futech-534	134	29	states	state	NOUN
futech-534	134	30	and	and	CCONJ
futech-534	134	31	timestamps	timestamp	NOUN
futech-534	134	32	.	.	PUNCT
futech-534	135	1	each	each	DET
futech-534	135	2	record	record	NOUN
futech-534	135	3	corresponds	correspond	VERB
futech-534	135	4	to	to	ADP
futech-534	135	5	continuous	continuous	ADJ
futech-534	135	6	monitoring	monitoring	NOUN
futech-534	135	7	intervals	interval	NOUN
futech-534	135	8	,	,	PUNCT
futech-534	135	9	representing	represent	VERB
futech-534	135	10	the	the	DET
futech-534	135	11	dynamic	dynamic	ADJ
futech-534	135	12	behavior	behavior	NOUN
futech-534	135	13	of	of	ADP
futech-534	135	14	process	process	NOUN
futech-534	135	15	equipment	equipment	NOUN
futech-534	135	16	.	.	PUNCT
futech-534	136	1	following	follow	VERB
futech-534	136	2	the	the	DET
futech-534	136	3	protocol	protocol	NOUN
futech-534	136	4	established	establish	VERB
futech-534	136	5	in	in	ADP
futech-534	136	6	[	[	X
futech-534	136	7	30	30	NUM
futech-534	136	8	]	]	PUNCT
futech-534	136	9	,	,	PUNCT
futech-534	136	10	the	the	DET
futech-534	136	11	dataset	dataset	NOUN
futech-534	136	12	was	be	AUX
futech-534	136	13	preprocessed	preprocesse	VERB
futech-534	136	14	to	to	PART
futech-534	136	15	extract	extract	VERB
futech-534	136	16	cycle	cycle	NOUN
futech-534	136	17	-	-	PUNCT
futech-534	136	18	time	time	NOUN
futech-534	136	19	components	component	NOUN
futech-534	136	20	from	from	ADP
futech-534	136	21	the	the	DET
futech-534	136	22	original	original	ADJ
futech-534	136	23	process	process	NOUN
futech-534	136	24	sequences	sequence	NOUN
futech-534	136	25	.	.	PUNCT
futech-534	137	1	these	these	PRON
futech-534	137	2	were	be	AUX
futech-534	137	3	mapped	map	VERB
futech-534	137	4	into	into	ADP
futech-534	137	5	highdimensional	highdimensional	ADJ
futech-534	137	6	feature	feature	NOUN
futech-534	137	7	matrices	matrix	NOUN
futech-534	137	8	that	that	PRON
futech-534	137	9	describe	describe	VERB
futech-534	137	10	machine	machine	NOUN
futech-534	137	11	status	status	NOUN
futech-534	137	12	ka	ka	PROPN
futech-534	137	13	.	.	PROPN
futech-534	137	14	kumar	kumar	PROPN
futech-534	137	15	&	&	CCONJ
futech-534	137	16	k.	k.	PROPN
futech-534	137	17	hemachandran	hemachandran	PROPN
futech-534	137	18	/	/	SYM
futech-534	137	19	future	future	ADJ
futech-534	137	20	technology	technology	NOUN
futech-534	137	21	february	february	PROPN
futech-534	137	22	2026|	2026|	NUM
futech-534	137	23	volume	volume	NOUN
futech-534	137	24	05	05	NUM
futech-534	138	1	|	|	ADV
futech-534	138	2	issue	issue	NOUN
futech-534	138	3	01	01	NUM
futech-534	139	1	|	|	ADV
futech-534	139	2	pages	page	VERB
futech-534	139	3	55	55	NUM
futech-534	139	4	-	-	SYM
futech-534	139	5	64	64	NUM
futech-534	139	6	58	58	NUM
futech-534	139	7	and	and	CCONJ
futech-534	139	8	process	process	NOUN
futech-534	139	9	flow	flow	NOUN
futech-534	139	10	behavior	behavior	NOUN
futech-534	139	11	.	.	PUNCT
futech-534	140	1	data	datum	NOUN
futech-534	140	2	were	be	AUX
futech-534	140	3	retrieved	retrieve	VERB
futech-534	140	4	in	in	ADP
futech-534	140	5	compliance	compliance	NOUN
futech-534	140	6	with	with	ADP
futech-534	140	7	open	open	ADJ
futech-534	140	8	-	-	PUNCT
futech-534	140	9	data	data	NOUN
futech-534	140	10	usage	usage	NOUN
futech-534	140	11	guidelines	guideline	NOUN
futech-534	140	12	for	for	ADP
futech-534	140	13	research	research	NOUN
futech-534	140	14	and	and	CCONJ
futech-534	140	15	academic	academic	ADJ
futech-534	140	16	purposes	purpose	NOUN
futech-534	140	17	.	.	PUNCT
futech-534	141	1	no	no	PRON
futech-534	141	2	confidential	confidential	ADJ
futech-534	141	3	,	,	PUNCT
futech-534	141	4	proprietary	proprietary	ADJ
futech-534	141	5	,	,	PUNCT
futech-534	141	6	or	or	CCONJ
futech-534	141	7	personally	personally	ADV
futech-534	141	8	identifiable	identifiable	ADJ
futech-534	141	9	information	information	NOUN
futech-534	141	10	(	(	PUNCT
futech-534	141	11	pii	pii	NOUN
futech-534	141	12	)	)	PUNCT
futech-534	141	13	was	be	AUX
futech-534	141	14	used	use	VERB
futech-534	141	15	.	.	PUNCT
futech-534	142	1	3.3	3.3	NUM
futech-534	142	2	population	population	NOUN
futech-534	142	3	and	and	CCONJ
futech-534	142	4	sampling	sample	VERB
futech-534	142	5	the	the	DET
futech-534	142	6	population	population	NOUN
futech-534	142	7	for	for	ADP
futech-534	142	8	this	this	DET
futech-534	142	9	research	research	NOUN
futech-534	142	10	includes	include	VERB
futech-534	142	11	all	all	DET
futech-534	142	12	process	process	NOUN
futech-534	142	13	data	datum	NOUN
futech-534	142	14	generated	generate	VERB
futech-534	142	15	from	from	ADP
futech-534	142	16	semiconductor	semiconductor	NOUN
futech-534	142	17	fabrication	fabrication	NOUN
futech-534	142	18	equipment	equipment	NOUN
futech-534	142	19	as	as	SCONJ
futech-534	142	20	captured	capture	VERB
futech-534	142	21	in	in	ADP
futech-534	142	22	the	the	DET
futech-534	142	23	dataset	dataset	NOUN
futech-534	142	24	[	[	X
futech-534	142	25	30	30	NUM
futech-534	142	26	]	]	PUNCT
futech-534	142	27	.	.	PUNCT
futech-534	143	1	to	to	PART
futech-534	143	2	ensure	ensure	VERB
futech-534	143	3	robust	robust	ADJ
futech-534	143	4	model	model	NOUN
futech-534	143	5	generalization	generalization	NOUN
futech-534	143	6	,	,	PUNCT
futech-534	143	7	a	a	DET
futech-534	143	8	systematic	systematic	ADJ
futech-534	143	9	random	random	ADJ
futech-534	143	10	sampling	sampling	NOUN
futech-534	143	11	approach	approach	NOUN
futech-534	143	12	was	be	AUX
futech-534	143	13	used	use	VERB
futech-534	143	14	.	.	PUNCT
futech-534	144	1	the	the	DET
futech-534	144	2	dataset	dataset	NOUN
futech-534	144	3	was	be	AUX
futech-534	144	4	partitioned	partition	VERB
futech-534	144	5	into	into	ADP
futech-534	144	6	70	70	NUM
futech-534	144	7	%	%	NOUN
futech-534	144	8	training	training	NOUN
futech-534	144	9	,	,	PUNCT
futech-534	144	10	15	15	NUM
futech-534	144	11	%	%	NOUN
futech-534	144	12	validation	validation	NOUN
futech-534	144	13	,	,	PUNCT
futech-534	144	14	and	and	CCONJ
futech-534	144	15	15	15	NUM
futech-534	144	16	%	%	NOUN
futech-534	144	17	testing	testing	NOUN
futech-534	144	18	subsets	subset	NOUN
futech-534	144	19	.	.	PUNCT
futech-534	145	1	each	each	DET
futech-534	145	2	subset	subset	NOUN
futech-534	145	3	retained	retain	VERB
futech-534	145	4	proportional	proportional	ADJ
futech-534	145	5	representation	representation	NOUN
futech-534	145	6	of	of	ADP
futech-534	145	7	different	different	ADJ
futech-534	145	8	machine	machine	NOUN
futech-534	145	9	states	state	NOUN
futech-534	145	10	,	,	PUNCT
futech-534	145	11	ensuring	ensure	VERB
futech-534	145	12	data	datum	NOUN
futech-534	145	13	balance	balance	NOUN
futech-534	145	14	.	.	PUNCT
futech-534	146	1	a	a	DET
futech-534	146	2	leave	leave	VERB
futech-534	146	3	-	-	PUNCT
futech-534	146	4	one	one	NUM
futech-534	146	5	-	-	PUNCT
futech-534	146	6	domain	domain	NOUN
futech-534	146	7	-	-	PUNCT
futech-534	146	8	out	out	ADP
futech-534	146	9	(	(	PUNCT
futech-534	146	10	lodo	lodo	PROPN
futech-534	146	11	)	)	PUNCT
futech-534	146	12	validation	validation	NOUN
futech-534	146	13	strategy	strategy	NOUN
futech-534	146	14	was	be	AUX
futech-534	146	15	employed	employ	VERB
futech-534	146	16	:	:	PUNCT
futech-534	146	17	in	in	ADP
futech-534	146	18	each	each	DET
futech-534	146	19	run	run	NOUN
futech-534	146	20	,	,	PUNCT
futech-534	146	21	one	one	NUM
futech-534	146	22	subset	subset	NOUN
futech-534	146	23	of	of	ADP
futech-534	146	24	process	process	NOUN
futech-534	146	25	equipment	equipment	NOUN
futech-534	146	26	data	datum	NOUN
futech-534	146	27	was	be	AUX
futech-534	146	28	treated	treat	VERB
futech-534	146	29	as	as	ADP
futech-534	146	30	a	a	DET
futech-534	146	31	target	target	NOUN
futech-534	146	32	domain	domain	NOUN
futech-534	146	33	,	,	PUNCT
futech-534	146	34	while	while	SCONJ
futech-534	146	35	others	other	NOUN
futech-534	146	36	served	serve	VERB
futech-534	146	37	as	as	ADP
futech-534	146	38	source	source	NOUN
futech-534	146	39	domains	domain	NOUN
futech-534	146	40	.	.	PUNCT
futech-534	147	1	this	this	DET
futech-534	147	2	cross	cross	ADJ
futech-534	147	3	-	-	ADJ
futech-534	147	4	validation	validation	ADJ
futech-534	147	5	approach	approach	NOUN
futech-534	147	6	evaluates	evaluate	VERB
futech-534	147	7	the	the	DET
futech-534	147	8	model	model	NOUN
futech-534	147	9	’s	’s	PART
futech-534	147	10	transferability	transferability	NOUN
futech-534	147	11	to	to	ADP
futech-534	147	12	unseen	unseen	ADJ
futech-534	147	13	fab	fab	ADJ
futech-534	147	14	contexts	contexts	NOUN
futech-534	147	15	—	—	PUNCT
futech-534	147	16	a	a	DET
futech-534	147	17	crucial	crucial	ADJ
futech-534	147	18	test	test	NOUN
futech-534	147	19	for	for	ADP
futech-534	147	20	hierarchical	hierarchical	ADJ
futech-534	147	21	transfer	transfer	NOUN
futech-534	147	22	learning	learn	VERB
futech-534	147	23	frameworks	framework	NOUN
futech-534	147	24	.	.	PUNCT
futech-534	148	1	3.4	3.4	NUM
futech-534	148	2	data	datum	NOUN
futech-534	148	3	preprocessing	preprocessing	NOUN
futech-534	148	4	and	and	CCONJ
futech-534	148	5	feature	feature	NOUN
futech-534	148	6	engineering	engineer	VERB
futech-534	148	7	the	the	DET
futech-534	148	8	raw	raw	ADJ
futech-534	148	9	data	datum	NOUN
futech-534	148	10	from	from	ADP
futech-534	148	11	ref	ref	NOUN
futech-534	148	12	[	[	X
futech-534	148	13	30	30	NUM
futech-534	148	14	]	]	PUNCT
futech-534	148	15	underwent	undergo	VERB
futech-534	148	16	several	several	ADJ
futech-534	148	17	preprocessing	preprocessing	NOUN
futech-534	148	18	and	and	CCONJ
futech-534	148	19	feature	feature	NOUN
futech-534	148	20	-	-	PUNCT
futech-534	148	21	engineering	engineering	NOUN
futech-534	148	22	steps	step	NOUN
futech-534	148	23	before	before	ADP
futech-534	148	24	modeling	model	VERB
futech-534	148	25	:	:	PUNCT
futech-534	148	26	•	•	NUM
futech-534	148	27	data	datum	NOUN
futech-534	148	28	cleaning	cleaning	NOUN
futech-534	148	29	:	:	PUNCT
futech-534	148	30	outliers	outlier	NOUN
futech-534	148	31	were	be	AUX
futech-534	148	32	identified	identify	VERB
futech-534	148	33	using	use	VERB
futech-534	148	34	the	the	DET
futech-534	148	35	interquartile	interquartile	ADJ
futech-534	148	36	range	range	NOUN
futech-534	148	37	(	(	PUNCT
futech-534	148	38	iqr	iqr	NOUN
futech-534	148	39	)	)	PUNCT
futech-534	148	40	method	method	NOUN
futech-534	148	41	and	and	CCONJ
futech-534	148	42	removed	remove	VERB
futech-534	148	43	.	.	PUNCT
futech-534	149	1	•	•	NUM
futech-534	149	2	missing	miss	VERB
futech-534	149	3	data	datum	NOUN
futech-534	149	4	handling	handling	NOUN
futech-534	149	5	:	:	PUNCT
futech-534	149	6	missing	miss	VERB
futech-534	149	7	values	value	NOUN
futech-534	149	8	were	be	AUX
futech-534	149	9	imputed	impute	VERB
futech-534	149	10	through	through	ADP
futech-534	149	11	multivariate	multivariate	NOUN
futech-534	149	12	interpolation	interpolation	NOUN
futech-534	149	13	using	use	VERB
futech-534	149	14	correlated	correlate	VERB
futech-534	149	15	process	process	NOUN
futech-534	149	16	variables	variable	NOUN
futech-534	149	17	.	.	PUNCT
futech-534	150	1	•	•	NUM
futech-534	150	2	feature	feature	NOUN
futech-534	150	3	encoding	encoding	NOUN
futech-534	150	4	:	:	PUNCT
futech-534	150	5	categorical	categorical	ADJ
futech-534	150	6	features	feature	NOUN
futech-534	150	7	(	(	PUNCT
futech-534	150	8	e.g.	e.g.	ADV
futech-534	150	9	,	,	PUNCT
futech-534	150	10	machine	machine	NOUN
futech-534	150	11	state	state	NOUN
futech-534	150	12	,	,	PUNCT
futech-534	150	13	product	product	NOUN
futech-534	150	14	i	i	PROPN
futech-534	150	15	d	d	PROPN
futech-534	150	16	)	)	PUNCT
futech-534	150	17	were	be	AUX
futech-534	150	18	embedded	embed	VERB
futech-534	150	19	using	use	VERB
futech-534	150	20	dense	dense	ADJ
futech-534	150	21	vector	vector	NOUN
futech-534	150	22	encodings	encoding	NOUN
futech-534	150	23	,	,	PUNCT
futech-534	150	24	while	while	SCONJ
futech-534	150	25	continuous	continuous	ADJ
futech-534	150	26	variables	variable	NOUN
futech-534	150	27	were	be	AUX
futech-534	150	28	standardized	standardize	VERB
futech-534	150	29	via	via	ADP
futech-534	150	30	z	z	NOUN
futech-534	150	31	-	-	PUNCT
futech-534	150	32	score	score	NOUN
futech-534	150	33	normalization	normalization	NOUN
futech-534	150	34	.	.	PUNCT
futech-534	151	1	•	•	NUM
futech-534	151	2	temporal	temporal	ADJ
futech-534	151	3	sequencing	sequencing	NOUN
futech-534	151	4	:	:	PUNCT
futech-534	151	5	process	process	NOUN
futech-534	151	6	logs	log	NOUN
futech-534	151	7	were	be	AUX
futech-534	151	8	organized	organize	VERB
futech-534	151	9	into	into	ADP
futech-534	151	10	time	time	NOUN
futech-534	151	11	-	-	PUNCT
futech-534	151	12	series	series	NOUN
futech-534	151	13	windows	window	NOUN
futech-534	151	14	defined	define	VERB
futech-534	151	15	as	as	ADP
futech-534	151	16	:	:	PUNCT
futech-534	151	17	𝑋	𝑋	PROPN
futech-534	151	18	=	=	SYM
futech-534	151	19	{	{	PUNCT
futech-534	151	20	[	[	X
futech-534	151	21	𝑥𝑡−𝑤	𝑥𝑡−𝑤	NOUN
futech-534	151	22	,	,	PUNCT
futech-534	151	23	…	…	PUNCT
futech-534	151	24	,	,	PUNCT
futech-534	151	25	𝑥𝑡	𝑥𝑡	ADP
futech-534	151	26	]	]	PUNCT
futech-534	151	27	,	,	PUNCT
futech-534	151	28	𝑦𝑡+1	𝑦𝑡+1	X
futech-534	151	29	}	}	PUNCT
futech-534	151	30	(	(	PUNCT
futech-534	151	31	1	1	X
futech-534	151	32	)	)	PUNCT
futech-534	151	33	where	where	SCONJ
futech-534	151	34	w	w	NOUN
futech-534	151	35	denotes	denote	VERB
futech-534	151	36	the	the	DET
futech-534	151	37	sliding	slide	VERB
futech-534	151	38	lookback	lookback	NOUN
futech-534	151	39	window	window	NOUN
futech-534	151	40	optimized	optimize	VERB
futech-534	151	41	during	during	ADP
futech-534	151	42	hyperparameter	hyperparameter	NOUN
futech-534	151	43	tuning	tuning	NOUN
futech-534	151	44	.	.	PUNCT
futech-534	152	1	•	•	NOUN
futech-534	152	2	balancing	balancing	NOUN
futech-534	152	3	:	:	PUNCT
futech-534	152	4	class	class	NOUN
futech-534	152	5	distributions	distribution	NOUN
futech-534	152	6	were	be	AUX
futech-534	152	7	equalized	equalize	VERB
futech-534	152	8	through	through	ADP
futech-534	152	9	random	random	ADJ
futech-534	152	10	under	under	NOUN
futech-534	152	11	-	-	PUNCT
futech-534	152	12	sampling	sampling	NOUN
futech-534	152	13	to	to	PART
futech-534	152	14	prevent	prevent	VERB
futech-534	152	15	bias	bias	NOUN
futech-534	152	16	toward	toward	ADP
futech-534	152	17	dominant	dominant	ADJ
futech-534	152	18	machine	machine	NOUN
futech-534	152	19	states	state	NOUN
futech-534	152	20	.	.	PUNCT
futech-534	153	1	these	these	DET
futech-534	153	2	preprocessing	preprocesse	VERB
futech-534	153	3	steps	step	NOUN
futech-534	153	4	ensured	ensure	VERB
futech-534	153	5	uniform	uniform	ADJ
futech-534	153	6	data	datum	NOUN
futech-534	153	7	quality	quality	NOUN
futech-534	153	8	,	,	PUNCT
futech-534	153	9	numerical	numerical	ADJ
futech-534	153	10	stability	stability	NOUN
futech-534	153	11	,	,	PUNCT
futech-534	153	12	and	and	CCONJ
futech-534	153	13	feature	feature	NOUN
futech-534	153	14	comparability	comparability	NOUN
futech-534	153	15	across	across	ADP
futech-534	153	16	domains	domain	NOUN
futech-534	153	17	.	.	PUNCT
futech-534	154	1	the	the	DET
futech-534	154	2	overall	overall	ADJ
futech-534	154	3	methodological	methodological	ADJ
futech-534	154	4	framework	framework	NOUN
futech-534	154	5	of	of	ADP
futech-534	154	6	this	this	DET
futech-534	154	7	study	study	NOUN
futech-534	154	8	,	,	PUNCT
futech-534	154	9	illustrated	illustrate	VERB
futech-534	154	10	in	in	ADP
futech-534	154	11	figure	figure	NOUN
futech-534	154	12	1	1	NUM
futech-534	154	13	,	,	PUNCT
futech-534	154	14	integrates	integrate	VERB
futech-534	154	15	standard	standard	ADJ
futech-534	154	16	data	data	NOUN
futech-534	154	17	-	-	PUNCT
futech-534	154	18	mining	mining	NOUN
futech-534	154	19	and	and	CCONJ
futech-534	154	20	machine	machine	NOUN
futech-534	154	21	-	-	PUNCT
futech-534	154	22	learning	learn	VERB
futech-534	154	23	practices	practice	NOUN
futech-534	154	24	commonly	commonly	ADV
futech-534	154	25	adopted	adopt	VERB
futech-534	154	26	in	in	ADP
futech-534	154	27	semiconductor	semiconductor	NOUN
futech-534	154	28	analytics	analytic	NOUN
futech-534	154	29	.	.	PUNCT
futech-534	155	1	3.5	3.5	NUM
futech-534	155	2	hierarchical	hierarchical	ADJ
futech-534	155	3	transfer	transfer	NOUN
futech-534	155	4	learning	learning	NOUN
futech-534	155	5	(	(	PUNCT
futech-534	155	6	htl	htl	PROPN
futech-534	155	7	)	)	PUNCT
futech-534	155	8	framework	framework	NOUN
futech-534	155	9	the	the	DET
futech-534	155	10	proposed	propose	VERB
futech-534	155	11	htl	htl	PROPN
futech-534	155	12	-	-	PUNCT
futech-534	155	13	hpo	hpo	PROPN
futech-534	155	14	model	model	NOUN
futech-534	155	15	operates	operate	VERB
futech-534	155	16	across	across	ADP
futech-534	155	17	three	three	NUM
futech-534	155	18	hierarchical	hierarchical	ADJ
futech-534	155	19	adaptation	adaptation	NOUN
futech-534	155	20	levels	level	NOUN
futech-534	155	21	:	:	PUNCT
futech-534	155	22	global	global	ADJ
futech-534	155	23	pretraining	pretraine	VERB
futech-534	155	24	,	,	PUNCT
futech-534	155	25	intermediate	intermediate	ADJ
futech-534	155	26	adaptation	adaptation	NOUN
futech-534	155	27	,	,	PUNCT
futech-534	155	28	and	and	CCONJ
futech-534	155	29	target	target	VERB
futech-534	155	30	fine	fine	ADV
futech-534	155	31	-	-	PUNCT
futech-534	155	32	tuning	tuning	NOUN
futech-534	155	33	.	.	PUNCT
futech-534	156	1	•	•	NUM
futech-534	156	2	global	global	ADJ
futech-534	156	3	pretraining	pretraining	NOUN
futech-534	156	4	:	:	PUNCT
futech-534	156	5	a	a	DET
futech-534	156	6	bidirectional	bidirectional	ADJ
futech-534	156	7	long	long	ADJ
futech-534	156	8	short	short	ADJ
futech-534	156	9	-	-	PUNCT
futech-534	156	10	term	term	NOUN
futech-534	156	11	memory	memory	NOUN
futech-534	156	12	(	(	PUNCT
futech-534	156	13	bilstm	bilstm	NOUN
futech-534	156	14	)	)	PUNCT
futech-534	156	15	network	network	NOUN
futech-534	156	16	was	be	AUX
futech-534	156	17	trained	train	VERB
futech-534	156	18	on	on	ADP
futech-534	156	19	the	the	DET
futech-534	156	20	sourcedomain	sourcedomain	NOUN
futech-534	156	21	data	datum	NOUN
futech-534	156	22	to	to	PART
futech-534	156	23	capture	capture	VERB
futech-534	156	24	temporal	temporal	ADJ
futech-534	156	25	dependencies	dependency	NOUN
futech-534	156	26	across	across	ADP
futech-534	156	27	multivariate	multivariate	NOUN
futech-534	156	28	process	process	NOUN
futech-534	156	29	sequences	sequence	NOUN
futech-534	156	30	.	.	PUNCT
futech-534	157	1	•	•	NUM
futech-534	157	2	intermediate	intermediate	ADJ
futech-534	157	3	adaptation	adaptation	NOUN
futech-534	157	4	:	:	PUNCT
futech-534	157	5	the	the	DET
futech-534	157	6	pretrained	pretraine	VERB
futech-534	157	7	parameters	parameter	NOUN
futech-534	157	8	were	be	AUX
futech-534	157	9	partially	partially	ADV
futech-534	157	10	frozen	frozen	ADJ
futech-534	157	11	and	and	CCONJ
futech-534	157	12	refined	refined	ADJ
futech-534	157	13	using	use	VERB
futech-534	157	14	intermediate	intermediate	ADJ
futech-534	157	15	data	datum	NOUN
futech-534	157	16	(	(	PUNCT
futech-534	157	17	e.g.	e.g.	ADV
futech-534	157	18	,	,	PUNCT
futech-534	157	19	similar	similar	ADJ
futech-534	157	20	tools	tool	NOUN
futech-534	157	21	or	or	CCONJ
futech-534	157	22	product	product	NOUN
futech-534	157	23	categories	category	NOUN
futech-534	157	24	)	)	PUNCT
futech-534	157	25	.	.	PUNCT
futech-534	158	1	adaptation	adaptation	NOUN
futech-534	158	2	employed	employ	VERB
futech-534	158	3	maximum	maximum	ADJ
futech-534	158	4	mean	mean	NOUN
futech-534	158	5	discrepancy	discrepancy	NOUN
futech-534	158	6	(	(	PUNCT
futech-534	158	7	mmd	mmd	PROPN
futech-534	158	8	)	)	PUNCT
futech-534	158	9	loss	loss	NOUN
futech-534	158	10	to	to	PART
futech-534	158	11	minimize	minimize	VERB
futech-534	158	12	domain	domain	NOUN
futech-534	158	13	differences	difference	NOUN
futech-534	158	14	:	:	PUNCT
futech-534	158	15	ℒmmd	ℒmmd	PROPN
futech-534	158	16	=	=	SYM
futech-534	158	17	‖	‖	PROPN
futech-534	158	18	1	1	NUM
futech-534	158	19	𝑁𝑠	𝑁𝑠	PROPN
futech-534	158	20	∑	∑	PUNCT
futech-534	158	21	  	  	SPACE
futech-534	158	22	𝑁𝑠	𝑁𝑠	PROPN
futech-534	158	23	𝑖=1	𝑖=1	PUNCT
futech-534	158	24	 	 	SPACE
futech-534	159	1	𝜙(𝑥𝑖	𝜙(𝑥𝑖	PROPN
futech-534	159	2	𝑠	𝑠	NOUN
futech-534	159	3	)	)	PUNCT
futech-534	159	4	−	−	PROPN
futech-534	159	5	1	1	NUM
futech-534	160	1	𝑁𝑡	𝑁𝑡	PROPN
futech-534	160	2	∑	∑	PART
futech-534	160	3	  	  	SPACE
futech-534	160	4	𝑁𝑡	𝑁𝑡	PROPN
futech-534	160	5	𝑗=1	𝑗=1	PROPN
futech-534	160	6	 	 	SPACE
futech-534	160	7	𝜙(𝑥𝑗	𝜙(𝑥𝑗	NOUN
futech-534	160	8	𝑡)‖	𝑡)‖	VERB
futech-534	160	9	2	2	NUM
futech-534	160	10	(	(	PUNCT
futech-534	160	11	2	2	NUM
futech-534	160	12	)	)	PUNCT
futech-534	160	13	•	•	NOUN
futech-534	160	14	target	target	NOUN
futech-534	160	15	fine	fine	ADV
futech-534	160	16	-	-	PUNCT
futech-534	160	17	tuning	tuning	NOUN
futech-534	160	18	:	:	PUNCT
futech-534	160	19	final	final	ADJ
futech-534	160	20	adaptation	adaptation	NOUN
futech-534	160	21	on	on	ADP
futech-534	160	22	the	the	DET
futech-534	160	23	target	target	NOUN
futech-534	160	24	dataset	dataset	VERB
futech-534	160	25	minimized	minimized	NOUN
futech-534	160	26	:	:	PUNCT
futech-534	160	27	min	min	NOUN
futech-534	160	28	𝜃𝑡	𝜃𝑡	ADP
futech-534	160	29	 	 	SPACE
futech-534	160	30	ℒ𝑡(𝑓(𝑥	ℒ𝑡(𝑓(𝑥	NOUN
futech-534	160	31	𝑡	𝑡	NOUN
futech-534	160	32	;	;	PUNCT
futech-534	160	33	𝜃𝑡	𝜃𝑡	ADV
futech-534	160	34	)	)	PUNCT
futech-534	160	35	)	)	PUNCT
futech-534	161	1	+	+	CCONJ
futech-534	161	2	𝜆ω(𝜃𝑡	𝜆ω(𝜃𝑡	NOUN
futech-534	161	3	,	,	PUNCT
futech-534	161	4	𝜃𝑠	𝜃𝑠	ADP
futech-534	161	5	)	)	PUNCT
futech-534	161	6	(	(	PUNCT
futech-534	161	7	3	3	X
futech-534	161	8	)	)	PUNCT
futech-534	161	9	where	where	SCONJ
futech-534	161	10	ω(𝜃𝑡	ω(𝜃𝑡	NOUN
futech-534	161	11	,	,	PUNCT
futech-534	161	12	𝜃𝑠	𝜃𝑠	PROPN
futech-534	161	13	)	)	PUNCT
futech-534	161	14	regularizes	regularize	VERB
futech-534	161	15	weight	weight	NOUN
futech-534	161	16	updates	update	NOUN
futech-534	161	17	to	to	PART
futech-534	161	18	ensure	ensure	VERB
futech-534	161	19	parameter	parameter	NOUN
futech-534	161	20	smoothness	smoothness	NOUN
futech-534	161	21	between	between	ADP
futech-534	161	22	domains	domain	NOUN
futech-534	161	23	.	.	PUNCT
futech-534	162	1	this	this	DET
futech-534	162	2	hierarchical	hierarchical	ADJ
futech-534	162	3	strategy	strategy	NOUN
futech-534	162	4	allows	allow	VERB
futech-534	162	5	effective	effective	ADJ
futech-534	162	6	knowledge	knowledge	NOUN
futech-534	162	7	reuse	reuse	NOUN
futech-534	162	8	from	from	ADP
futech-534	162	9	large	large	ADJ
futech-534	162	10	datarich	datarich	NOUN
futech-534	162	11	contexts	contexts	NOUN
futech-534	162	12	to	to	ADP
futech-534	162	13	smaller	small	ADJ
futech-534	162	14	or	or	CCONJ
futech-534	162	15	emerging	emerge	VERB
futech-534	162	16	process	process	NOUN
futech-534	162	17	lines	line	NOUN
futech-534	162	18	,	,	PUNCT
futech-534	162	19	improving	improve	VERB
futech-534	162	20	forecasting	forecasting	NOUN
futech-534	162	21	accuracy	accuracy	NOUN
futech-534	162	22	while	while	SCONJ
futech-534	162	23	reducing	reduce	VERB
futech-534	162	24	data	datum	NOUN
futech-534	162	25	dependency	dependency	NOUN
futech-534	162	26	.	.	PUNCT
futech-534	163	1	figure	figure	NOUN
futech-534	163	2	1	1	NUM
futech-534	163	3	.	.	PUNCT
futech-534	164	1	flow	flow	VERB
futech-534	164	2	chart	chart	NOUN
futech-534	164	3	of	of	ADP
futech-534	164	4	the	the	DET
futech-534	164	5	proposed	propose	VERB
futech-534	164	6	model	model	NOUN
futech-534	164	7	3.6	3.6	NUM
futech-534	164	8	hyperparameter	hyperparameter	NOUN
futech-534	164	9	optimization	optimization	NOUN
futech-534	164	10	model	model	NOUN
futech-534	164	11	hyperparameters	hyperparameter	NOUN
futech-534	164	12	were	be	AUX
futech-534	164	13	optimized	optimize	VERB
futech-534	164	14	using	use	VERB
futech-534	164	15	bayesian	bayesian	NOUN
futech-534	164	16	optimization	optimization	NOUN
futech-534	164	17	(	(	PUNCT
futech-534	164	18	bo	bo	PROPN
futech-534	164	19	)	)	PUNCT
futech-534	164	20	with	with	ADP
futech-534	164	21	a	a	DET
futech-534	164	22	tree	tree	NOUN
futech-534	164	23	-	-	PUNCT
futech-534	164	24	structured	structure	VERB
futech-534	164	25	parzen	parzen	NOUN
futech-534	164	26	estimator	estimator	NOUN
futech-534	164	27	(	(	PUNCT
futech-534	164	28	tpe	tpe	NOUN
futech-534	164	29	)	)	PUNCT
futech-534	164	30	surrogate	surrogate	ADJ
futech-534	164	31	function	function	NOUN
futech-534	164	32	.	.	PUNCT
futech-534	165	1	the	the	DET
futech-534	165	2	optimization	optimization	NOUN
futech-534	165	3	minimized	minimize	VERB
futech-534	165	4	validation	validation	NOUN
futech-534	165	5	loss	loss	NOUN
futech-534	165	6	ℒval	ℒval	PROPN
futech-534	165	7	:	:	PUNCT
futech-534	165	8	ℎ∗	ℎ∗	PROPN
futech-534	165	9	=	=	SYM
futech-534	166	1	arg⁡min	arg⁡min	NOUN
futech-534	166	2	ℎ∈ℋ	ℎ∈ℋ	NOUN
futech-534	166	3	 	 	SPACE
futech-534	166	4	ℒ𝑣𝑎𝑙(𝑓(𝑥	ℒ𝑣𝑎𝑙(𝑓(𝑥	NOUN
futech-534	166	5	;	;	PUNCT
futech-534	166	6	ℎ	ℎ	NOUN
futech-534	166	7	)	)	PUNCT
futech-534	166	8	)	)	PUNCT
futech-534	167	1	(	(	PUNCT
futech-534	167	2	4	4	X
futech-534	167	3	)	)	PUNCT
futech-534	167	4	the	the	DET
futech-534	167	5	optimization	optimization	NOUN
futech-534	167	6	searched	search	VERB
futech-534	167	7	across	across	ADP
futech-534	167	8	parameters	parameter	NOUN
futech-534	167	9	:	:	PUNCT
futech-534	167	10	•	•	ADP
futech-534	167	11	learning	learn	VERB
futech-534	167	12	rate	rate	NOUN
futech-534	167	13	∈	∈	PROPN
futech-534	168	1	[	[	X
futech-534	168	2	10−5	10−5	NUM
futech-534	168	3	,	,	PUNCT
futech-534	168	4	10−2	10−2	NUM
futech-534	168	5	]	]	PUNCT
futech-534	168	6	•	•	NOUN
futech-534	168	7	batch	batch	NOUN
futech-534	168	8	size	size	NOUN
futech-534	168	9	∈	∈	PROPN
futech-534	168	10	{	{	PUNCT
futech-534	168	11	32,64,128	32,64,128	NOUN
futech-534	168	12	}	}	PUNCT
futech-534	168	13	•	•	NUM
futech-534	168	14	hidden	hide	VERB
futech-534	168	15	layers	layer	NOUN
futech-534	168	16	∈	∈	PROPN
futech-534	168	17	{	{	PUNCT
futech-534	168	18	1	1	NUM
futech-534	168	19	−	−	NOUN
futech-534	168	20	4	4	NUM
futech-534	168	21	}	}	SYM
futech-534	168	22	•	•	X
futech-534	168	23	dropout	dropout	NOUN
futech-534	168	24	∈	∈	PROPN
futech-534	168	25	[	[	X
futech-534	168	26	0.1,0.5	0.1,0.5	X
futech-534	168	27	]	]	X
futech-534	168	28	•	•	NUM
futech-534	168	29	optimizer	optimizer	NOUN
futech-534	168	30	∈	∈	PROPN
futech-534	168	31	{	{	PUNCT
futech-534	168	32	adam	adam	NOUN
futech-534	168	33	,	,	PUNCT
futech-534	168	34	rmsprop	rmsprop	NOUN
futech-534	168	35	}	}	PUNCT
futech-534	168	36	the	the	DET
futech-534	168	37	tpe	tpe	NOUN
futech-534	168	38	surrogate	surrogate	PROPN
futech-534	168	39	model	model	PROPN
futech-534	168	40	estimated	estimate	VERB
futech-534	168	41	performance	performance	NOUN
futech-534	168	42	gains	gain	NOUN
futech-534	168	43	and	and	CCONJ
futech-534	168	44	selected	select	VERB
futech-534	168	45	configurations	configuration	NOUN
futech-534	168	46	maximizing	maximize	VERB
futech-534	168	47	expected	expect	VERB
futech-534	168	48	improvement	improvement	NOUN
futech-534	168	49	(	(	PUNCT
futech-534	168	50	ei	ei	NOUN
futech-534	168	51	)	)	PUNCT
futech-534	168	52	.	.	PUNCT
futech-534	169	1	this	this	DET
futech-534	169	2	automated	automate	VERB
futech-534	169	3	optimization	optimization	NOUN
futech-534	169	4	substantially	substantially	ADV
futech-534	169	5	reduced	reduce	VERB
futech-534	169	6	computational	computational	ADJ
futech-534	169	7	cost	cost	NOUN
futech-534	169	8	compared	compare	VERB
futech-534	169	9	to	to	ADP
futech-534	169	10	grid	grid	NOUN
futech-534	169	11	search	search	NOUN
futech-534	169	12	and	and	CCONJ
futech-534	169	13	ensured	ensure	VERB
futech-534	169	14	reproducible	reproducible	ADJ
futech-534	169	15	,	,	PUNCT
futech-534	169	16	near	near	ADP
futech-534	169	17	-	-	PUNCT
futech-534	169	18	optimal	optimal	ADJ
futech-534	169	19	configurations	configuration	NOUN
futech-534	169	20	.	.	PUNCT
futech-534	170	1	ka	ka	PROPN
futech-534	170	2	.	.	PROPN
futech-534	170	3	kumar	kumar	PROPN
futech-534	170	4	&	&	CCONJ
futech-534	170	5	k.	k.	PROPN
futech-534	170	6	hemachandran	hemachandran	PROPN
futech-534	170	7	/	/	SYM
futech-534	170	8	future	future	ADJ
futech-534	170	9	technology	technology	NOUN
futech-534	170	10	february	february	PROPN
futech-534	170	11	2026|	2026|	NUM
futech-534	170	12	volume	volume	NOUN
futech-534	170	13	05	05	NUM
futech-534	171	1	|	|	ADV
futech-534	171	2	issue	issue	NOUN
futech-534	171	3	01	01	NUM
futech-534	172	1	|	|	ADV
futech-534	172	2	pages	page	VERB
futech-534	172	3	55	55	NUM
futech-534	172	4	-	-	SYM
futech-534	172	5	64	64	NUM
futech-534	172	6	59	59	NUM
futech-534	172	7	3.7	3.7	NUM
futech-534	172	8	data	datum	NOUN
futech-534	172	9	analysis	analysis	NOUN
futech-534	172	10	technique	technique	NOUN
futech-534	172	11	all	all	DET
futech-534	172	12	analyses	analysis	NOUN
futech-534	172	13	were	be	AUX
futech-534	172	14	conducted	conduct	VERB
futech-534	172	15	using	use	VERB
futech-534	172	16	python	python	PROPN
futech-534	172	17	3.11	3.11	NUM
futech-534	172	18	,	,	PUNCT
futech-534	172	19	tensorflow	tensorflow	NOUN
futech-534	172	20	2.15	2.15	NUM
futech-534	172	21	,	,	PUNCT
futech-534	172	22	and	and	CCONJ
futech-534	172	23	optuna	optuna	ADP
futech-534	172	24	3.4	3.4	NUM
futech-534	172	25	on	on	ADP
futech-534	172	26	an	an	DET
futech-534	172	27	nvidia	nvidia	PROPN
futech-534	172	28	a100	a100	PROPN
futech-534	172	29	gpu	gpu	X
futech-534	172	30	(	(	PUNCT
futech-534	172	31	80	80	NUM
futech-534	172	32	gb	gb	NOUN
futech-534	172	33	)	)	PUNCT
futech-534	172	34	with	with	ADP
futech-534	172	35	an	an	DET
futech-534	172	36	intel	intel	PROPN
futech-534	172	37	xeon	xeon	PROPN
futech-534	172	38	silver	silver	PROPN
futech-534	172	39	4214	4214	NUM
futech-534	172	40	cpu	cpu	NOUN
futech-534	172	41	and	and	CCONJ
futech-534	172	42	256	256	NUM
futech-534	172	43	gb	gb	NOUN
futech-534	172	44	ram	ram	NOUN
futech-534	172	45	.	.	PUNCT
futech-534	173	1	model	model	NOUN
futech-534	173	2	evaluation	evaluation	NOUN
futech-534	173	3	metrics	metric	NOUN
futech-534	173	4	included	include	VERB
futech-534	173	5	root	root	NOUN
futech-534	173	6	mean	mean	NOUN
futech-534	173	7	square	square	ADJ
futech-534	173	8	error	error	NOUN
futech-534	173	9	(	(	PUNCT
futech-534	173	10	rmse	rmse	NOUN
futech-534	173	11	)	)	PUNCT
futech-534	173	12	,	,	PUNCT
futech-534	173	13	mean	mean	VERB
futech-534	173	14	absolute	absolute	ADJ
futech-534	173	15	error	error	NOUN
futech-534	173	16	(	(	PUNCT
futech-534	173	17	mae	mae	PROPN
futech-534	173	18	)	)	PUNCT
futech-534	173	19	,	,	PUNCT
futech-534	173	20	and	and	CCONJ
futech-534	173	21	coefficient	coefficient	NOUN
futech-534	173	22	of	of	ADP
futech-534	173	23	determination	determination	NOUN
futech-534	173	24	(	(	PUNCT
futech-534	173	25	𝑅2	𝑅2	NOUN
futech-534	173	26	)	)	PUNCT
futech-534	173	27	,	,	PUNCT
futech-534	173	28	defined	define	VERB
futech-534	173	29	as	as	ADP
futech-534	173	30	:	:	PUNCT
futech-534	173	31	𝑅𝑀𝑆𝐸	𝑅𝑀𝑆𝐸	NOUN
futech-534	173	32	=	=	NOUN
futech-534	174	1	√	√	ADP
futech-534	174	2	1	1	NUM
futech-534	174	3	𝑁	𝑁	PROPN
futech-534	174	4	∑	∑	DET
futech-534	174	5	 	 	SPACE
futech-534	174	6	𝑁	𝑁	PROPN
futech-534	174	7	𝑖=1	𝑖=1	PROPN
futech-534	174	8	  	  	SPACE
futech-534	174	9	(	(	PUNCT
futech-534	174	10	𝑦𝑖	𝑦𝑖	PROPN
futech-534	174	11	−	−	PROPN
futech-534	174	12	�	�	PROPN
futech-534	174	13	̂	̂	VERB
futech-534	174	14	�	�	NOUN
futech-534	174	15	𝑖	𝑖	NUM
futech-534	174	16	)	)	PUNCT
futech-534	174	17	2	2	NUM
futech-534	174	18	,	,	PUNCT
futech-534	174	19	𝑀𝐴𝐸	𝑀𝐴𝐸	PROPN
futech-534	174	20	=	=	SYM
futech-534	174	21	1	1	NUM
futech-534	174	22	𝑁	𝑁	PROPN
futech-534	174	23	∑	∑	PART
futech-534	174	24	 	 	SPACE
futech-534	174	25	𝑁	𝑁	PROPN
futech-534	174	26	𝑖=1	𝑖=1	PROPN
futech-534	174	27	|𝑦𝑖	|𝑦𝑖	ADP
futech-534	174	28	−	−	PROPN
futech-534	174	29	�	�	PROPN
futech-534	174	30	̂	̂	SYM
futech-534	174	31	�	�	NOUN
futech-534	174	32	𝑖|,⁡⁡⁡⁡	𝑖|,⁡⁡⁡⁡	NOUN
futech-534	174	33	𝑅2	𝑅2	NOUN
futech-534	174	34	=	=	NOUN
futech-534	174	35	1	1	NUM
futech-534	174	36	−	−	NOUN
futech-534	174	37	∑	∑	PUNCT
futech-534	174	38	 	 	SPACE
futech-534	174	39	𝑖	𝑖	SYM
futech-534	174	40	 	 	SPACE
futech-534	174	41	(	(	PUNCT
futech-534	174	42	𝑦𝑖−	𝑦𝑖−	NUM
futech-534	174	43	�	�	PROPN
futech-534	174	44	̂	̂	VERB
futech-534	174	45	�	�	NOUN
futech-534	174	46	𝑖	𝑖	SYM
futech-534	174	47	)	)	PUNCT
futech-534	174	48	2	2	NUM
futech-534	174	49	∑	∑	ADP
futech-534	174	50	 	 	SPACE
futech-534	174	51	𝑖	𝑖	SYM
futech-534	174	52	 	 	SPACE
futech-534	174	53	(	(	PUNCT
futech-534	174	54	𝑦𝑖−𝑦‾	𝑦𝑖−𝑦‾	PROPN
futech-534	174	55	)	)	PUNCT
futech-534	174	56	2	2	NUM
futech-534	174	57	(	(	PUNCT
futech-534	174	58	5	5	NUM
futech-534	174	59	)	)	PUNCT
futech-534	174	60	to	to	PART
futech-534	174	61	evaluate	evaluate	VERB
futech-534	174	62	significance	significance	NOUN
futech-534	174	63	,	,	PUNCT
futech-534	174	64	a	a	DET
futech-534	174	65	paired	pair	VERB
futech-534	174	66	𝑡-test	𝑡-test	NOUN
futech-534	174	67	was	be	AUX
futech-534	174	68	applied	apply	VERB
futech-534	174	69	between	between	ADP
futech-534	174	70	htl	htl	PROPN
futech-534	174	71	-	-	PUNCT
futech-534	174	72	hpo	hpo	PROPN
futech-534	174	73	and	and	CCONJ
futech-534	174	74	baseline	baseline	NOUN
futech-534	174	75	models	model	NOUN
futech-534	174	76	(	(	PUNCT
futech-534	174	77	lstm	lstm	NOUN
futech-534	174	78	,	,	PUNCT
futech-534	174	79	ffnn	ffnn	NOUN
futech-534	174	80	,	,	PUNCT
futech-534	174	81	rf	rf	NOUN
futech-534	174	82	,	,	PUNCT
futech-534	174	83	svr	svr	PROPN
futech-534	174	84	)	)	PUNCT
futech-534	174	85	.	.	PUNCT
futech-534	175	1	results	result	NOUN
futech-534	175	2	were	be	AUX
futech-534	175	3	deemed	deem	VERB
futech-534	175	4	statistically	statistically	ADV
futech-534	175	5	significant	significant	ADJ
futech-534	175	6	at	at	ADP
futech-534	175	7	𝑝	𝑝	NOUN
futech-534	175	8	<	<	X
futech-534	175	9	0.05	0.05	NUM
futech-534	175	10	.	.	PUNCT
futech-534	176	1	3.8	3.8	NUM
futech-534	176	2	ethical	ethical	ADJ
futech-534	176	3	considerations	consideration	NOUN
futech-534	176	4	ethical	ethical	ADJ
futech-534	176	5	and	and	CCONJ
futech-534	176	6	data	data	NOUN
futech-534	176	7	-	-	PUNCT
futech-534	176	8	handling	handling	NOUN
futech-534	176	9	principles	principle	NOUN
futech-534	176	10	were	be	AUX
futech-534	176	11	followed	follow	VERB
futech-534	176	12	rigorously	rigorously	ADV
futech-534	176	13	:	:	PUNCT
futech-534	176	14	•	•	NUM
futech-534	176	15	data	datum	NOUN
futech-534	176	16	source	source	NOUN
futech-534	176	17	acknowledgment	acknowledgment	NOUN
futech-534	176	18	:	:	PUNCT
futech-534	176	19	the	the	DET
futech-534	176	20	dataset	dataset	VERB
futech-534	176	21	utilized	utilize	VERB
futech-534	176	22	originates	originate	NOUN
futech-534	176	23	from	from	ADP
futech-534	176	24	tchatchoua	tchatchoua	PROPN
futech-534	176	25	et	et	PROPN
futech-534	176	26	al	al	PROPN
futech-534	176	27	.	.	PUNCT
futech-534	177	1	[	[	X
futech-534	177	2	30	30	NUM
futech-534	177	3	]	]	PUNCT
futech-534	177	4	,	,	PUNCT
futech-534	177	5	cited	cite	VERB
futech-534	177	6	accordingly	accordingly	ADV
futech-534	177	7	,	,	PUNCT
futech-534	177	8	and	and	CCONJ
futech-534	177	9	was	be	AUX
futech-534	177	10	used	use	VERB
futech-534	177	11	under	under	ADP
futech-534	177	12	fair	fair	ADJ
futech-534	177	13	academic	academic	ADJ
futech-534	177	14	usage	usage	NOUN
futech-534	177	15	.	.	PUNCT
futech-534	178	1	•	•	NUM
futech-534	178	2	confidentiality	confidentiality	NOUN
futech-534	178	3	and	and	CCONJ
futech-534	178	4	privacy	privacy	NOUN
futech-534	178	5	:	:	PUNCT
futech-534	178	6	no	no	DET
futech-534	178	7	personally	personally	ADV
futech-534	178	8	identifiable	identifiable	ADJ
futech-534	178	9	or	or	CCONJ
futech-534	178	10	sensitive	sensitive	ADJ
futech-534	178	11	industrial	industrial	ADJ
futech-534	178	12	information	information	NOUN
futech-534	178	13	was	be	AUX
futech-534	178	14	included	include	VERB
futech-534	178	15	.	.	PUNCT
futech-534	179	1	•	•	NUM
futech-534	179	2	research	research	NOUN
futech-534	179	3	integrity	integrity	NOUN
futech-534	179	4	:	:	PUNCT
futech-534	179	5	all	all	DET
futech-534	179	6	experimental	experimental	ADJ
futech-534	179	7	methods	method	NOUN
futech-534	179	8	,	,	PUNCT
futech-534	179	9	algorithms	algorithm	NOUN
futech-534	179	10	,	,	PUNCT
futech-534	179	11	and	and	CCONJ
futech-534	179	12	citations	citation	NOUN
futech-534	179	13	were	be	AUX
futech-534	179	14	transparently	transparently	ADV
futech-534	179	15	documented	document	VERB
futech-534	179	16	.	.	PUNCT
futech-534	180	1	•	•	NUM
futech-534	180	2	reproducibility	reproducibility	NOUN
futech-534	180	3	:	:	PUNCT
futech-534	180	4	the	the	DET
futech-534	180	5	study	study	NOUN
futech-534	180	6	design	design	NOUN
futech-534	180	7	,	,	PUNCT
futech-534	180	8	model	model	NOUN
futech-534	180	9	parameters	parameter	NOUN
futech-534	180	10	,	,	PUNCT
futech-534	180	11	and	and	CCONJ
futech-534	180	12	analysis	analysis	NOUN
futech-534	180	13	pipeline	pipeline	NOUN
futech-534	180	14	adhere	adhere	VERB
futech-534	180	15	to	to	ADP
futech-534	180	16	open	open	ADJ
futech-534	180	17	-	-	PUNCT
futech-534	180	18	science	science	NOUN
futech-534	180	19	practices	practice	NOUN
futech-534	180	20	to	to	PART
futech-534	180	21	allow	allow	VERB
futech-534	180	22	reproducibility	reproducibility	NOUN
futech-534	180	23	.	.	PUNCT
futech-534	181	1	•	•	NUM
futech-534	181	2	sustainability	sustainability	NOUN
futech-534	181	3	and	and	CCONJ
futech-534	181	4	responsibility	responsibility	NOUN
futech-534	181	5	:	:	PUNCT
futech-534	181	6	the	the	DET
futech-534	181	7	study	study	NOUN
futech-534	181	8	promotes	promote	VERB
futech-534	181	9	energy	energy	NOUN
futech-534	181	10	-	-	PUNCT
futech-534	181	11	efficient	efficient	ADJ
futech-534	181	12	and	and	CCONJ
futech-534	181	13	data	datum	NOUN
futech-534	181	14	-	-	PUNCT
futech-534	181	15	minimal	minimal	ADJ
futech-534	181	16	learning	learning	NOUN
futech-534	181	17	methods	method	NOUN
futech-534	181	18	aligned	align	VERB
futech-534	181	19	with	with	ADP
futech-534	181	20	sustainable	sustainable	ADJ
futech-534	181	21	semiconductor	semiconductor	NOUN
futech-534	181	22	production	production	NOUN
futech-534	181	23	.	.	PUNCT
futech-534	182	1	4	4	X
futech-534	182	2	.	.	X
futech-534	182	3	experimental	experimental	ADJ
futech-534	182	4	results	result	NOUN
futech-534	182	5	and	and	CCONJ
futech-534	182	6	analysis	analysis	NOUN
futech-534	182	7	this	this	DET
futech-534	182	8	section	section	NOUN
futech-534	182	9	presents	present	VERB
futech-534	182	10	the	the	DET
futech-534	182	11	comprehensive	comprehensive	ADJ
futech-534	182	12	experimental	experimental	ADJ
futech-534	182	13	findings	finding	NOUN
futech-534	182	14	from	from	ADP
futech-534	182	15	the	the	DET
futech-534	182	16	implementation	implementation	NOUN
futech-534	182	17	of	of	ADP
futech-534	182	18	the	the	DET
futech-534	182	19	proposed	propose	VERB
futech-534	182	20	optimized	optimize	VERB
futech-534	182	21	hierarchical	hierarchical	ADJ
futech-534	182	22	transfer	transfer	NOUN
futech-534	182	23	learning	learn	VERB
futech-534	182	24	with	with	ADP
futech-534	182	25	hyperparameter	hyperparameter	NOUN
futech-534	182	26	optimization	optimization	NOUN
futech-534	182	27	(	(	PUNCT
futech-534	182	28	htl	htl	PROPN
futech-534	182	29	-	-	PUNCT
futech-534	182	30	hpo	hpo	PROPN
futech-534	182	31	)	)	PUNCT
futech-534	182	32	framework	framework	NOUN
futech-534	182	33	.	.	PUNCT
futech-534	183	1	the	the	DET
futech-534	183	2	results	result	NOUN
futech-534	183	3	validate	validate	VERB
futech-534	183	4	the	the	DET
futech-534	183	5	superiority	superiority	NOUN
futech-534	183	6	of	of	ADP
futech-534	183	7	the	the	DET
futech-534	183	8	model	model	NOUN
futech-534	183	9	over	over	ADP
futech-534	183	10	conventional	conventional	ADJ
futech-534	183	11	forecasting	forecasting	NOUN
futech-534	183	12	approaches	approach	NOUN
futech-534	183	13	in	in	ADP
futech-534	183	14	semiconductor	semiconductor	NOUN
futech-534	183	15	wafer	wafer	NOUN
futech-534	183	16	fabrication	fabrication	NOUN
futech-534	183	17	by	by	ADP
futech-534	183	18	comparing	compare	VERB
futech-534	183	19	multiple	multiple	ADJ
futech-534	183	20	metrics	metric	NOUN
futech-534	183	21	across	across	ADP
futech-534	183	22	baseline	baseline	NOUN
futech-534	183	23	models	model	NOUN
futech-534	183	24	.	.	PUNCT
futech-534	184	1	these	these	DET
futech-534	184	2	evaluations	evaluation	NOUN
futech-534	184	3	not	not	PART
futech-534	184	4	only	only	ADV
futech-534	184	5	demonstrate	demonstrate	VERB
futech-534	184	6	quantitative	quantitative	ADJ
futech-534	184	7	accuracy	accuracy	NOUN
futech-534	184	8	but	but	CCONJ
futech-534	184	9	also	also	ADV
futech-534	184	10	provide	provide	VERB
futech-534	184	11	qualitative	qualitative	ADJ
futech-534	184	12	insights	insight	NOUN
futech-534	184	13	into	into	ADP
futech-534	184	14	the	the	DET
futech-534	184	15	operational	operational	ADJ
futech-534	184	16	and	and	CCONJ
futech-534	184	17	computational	computational	ADJ
futech-534	184	18	efficiency	efficiency	NOUN
futech-534	184	19	achieved	achieve	VERB
futech-534	184	20	through	through	ADP
futech-534	184	21	the	the	DET
futech-534	184	22	integration	integration	NOUN
futech-534	184	23	of	of	ADP
futech-534	184	24	hierarchical	hierarchical	ADJ
futech-534	184	25	transfer	transfer	NOUN
futech-534	184	26	learning	learning	NOUN
futech-534	184	27	and	and	CCONJ
futech-534	184	28	bayesian	bayesian	NOUN
futech-534	184	29	optimization	optimization	NOUN
futech-534	184	30	.	.	PUNCT
futech-534	185	1	the	the	DET
futech-534	185	2	results	result	NOUN
futech-534	185	3	are	be	AUX
futech-534	185	4	derived	derive	VERB
futech-534	185	5	using	use	VERB
futech-534	185	6	a	a	DET
futech-534	185	7	real	real	ADJ
futech-534	185	8	-	-	PUNCT
futech-534	185	9	world	world	NOUN
futech-534	185	10	semiconductor	semiconductor	NOUN
futech-534	185	11	manufacturing	manufacturing	NOUN
futech-534	185	12	dataset	dataset	NOUN
futech-534	185	13	published	publish	VERB
futech-534	185	14	by	by	ADP
futech-534	185	15	tchatchoua	tchatchoua	PROPN
futech-534	185	16	et	et	PROPN
futech-534	185	17	al	al	PROPN
futech-534	185	18	.	.	PUNCT
futech-534	186	1	[	[	X
futech-534	186	2	30	30	NUM
futech-534	186	3	]	]	PUNCT
futech-534	186	4	,	,	PUNCT
futech-534	186	5	which	which	PRON
futech-534	186	6	contains	contain	VERB
futech-534	186	7	multivariate	multivariate	NOUN
futech-534	186	8	time	time	NOUN
futech-534	186	9	-	-	PUNCT
futech-534	186	10	series	series	NOUN
futech-534	186	11	data	datum	NOUN
futech-534	186	12	obtained	obtain	VERB
futech-534	186	13	from	from	ADP
futech-534	186	14	process	process	NOUN
futech-534	186	15	monitoring	monitoring	NOUN
futech-534	186	16	equipment	equipment	NOUN
futech-534	186	17	.	.	PUNCT
futech-534	187	1	the	the	DET
futech-534	187	2	dataset	dataset	NOUN
futech-534	187	3	provides	provide	VERB
futech-534	187	4	highdimensional	highdimensional	ADJ
futech-534	187	5	sensor	sensor	NOUN
futech-534	187	6	readings	reading	NOUN
futech-534	187	7	(	(	PUNCT
futech-534	187	8	temperature	temperature	NOUN
futech-534	187	9	,	,	PUNCT
futech-534	187	10	flow	flow	NOUN
futech-534	187	11	rate	rate	NOUN
futech-534	187	12	,	,	PUNCT
futech-534	187	13	pressure	pressure	NOUN
futech-534	187	14	,	,	PUNCT
futech-534	187	15	vibration	vibration	NOUN
futech-534	187	16	,	,	PUNCT
futech-534	187	17	and	and	CCONJ
futech-534	187	18	tool	tool	NOUN
futech-534	187	19	status	status	NOUN
futech-534	187	20	)	)	PUNCT
futech-534	187	21	,	,	PUNCT
futech-534	187	22	making	make	VERB
futech-534	187	23	it	it	PRON
futech-534	187	24	suitable	suitable	ADJ
futech-534	187	25	for	for	ADP
futech-534	187	26	testing	test	VERB
futech-534	187	27	advanced	advanced	ADJ
futech-534	187	28	forecasting	forecasting	NOUN
futech-534	187	29	models	model	NOUN
futech-534	187	30	under	under	ADP
futech-534	187	31	realistic	realistic	ADJ
futech-534	187	32	industrial	industrial	ADJ
futech-534	187	33	variability	variability	NOUN
futech-534	187	34	.	.	PUNCT
futech-534	188	1	4.1	4.1	NUM
futech-534	188	2	experimental	experimental	ADJ
futech-534	188	3	setup	setup	NOUN
futech-534	188	4	and	and	CCONJ
futech-534	188	5	evaluation	evaluation	NOUN
futech-534	188	6	protocol	protocol	NOUN
futech-534	188	7	all	all	DET
futech-534	188	8	experiments	experiment	NOUN
futech-534	188	9	were	be	AUX
futech-534	188	10	conducted	conduct	VERB
futech-534	188	11	on	on	ADP
futech-534	188	12	a	a	DET
futech-534	188	13	high	high	ADJ
futech-534	188	14	-	-	PUNCT
futech-534	188	15	performance	performance	NOUN
futech-534	188	16	computing	computing	NOUN
futech-534	188	17	(	(	PUNCT
futech-534	188	18	hpc	hpc	NOUN
futech-534	188	19	)	)	PUNCT
futech-534	188	20	cluster	cluster	NOUN
futech-534	188	21	with	with	ADP
futech-534	188	22	the	the	DET
futech-534	188	23	following	follow	VERB
futech-534	188	24	specifications	specification	NOUN
futech-534	188	25	:	:	PUNCT
futech-534	188	26	nvidia	nvidia	PROPN
futech-534	188	27	a100	a100	PROPN
futech-534	188	28	gpu	gpu	X
futech-534	188	29	(	(	PUNCT
futech-534	188	30	80	80	NUM
futech-534	188	31	gb	gb	NOUN
futech-534	188	32	vram	vram	NOUN
futech-534	188	33	)	)	PUNCT
futech-534	188	34	,	,	PUNCT
futech-534	188	35	intel	intel	PROPN
futech-534	188	36	xeon	xeon	PROPN
futech-534	188	37	silver	silver	PROPN
futech-534	188	38	4214	4214	NUM
futech-534	188	39	cpu	cpu	NOUN
futech-534	188	40	(	(	PUNCT
futech-534	188	41	2.20	2.20	NUM
futech-534	188	42	ghz	ghz	NOUN
futech-534	188	43	,	,	PUNCT
futech-534	188	44	24	24	NUM
futech-534	188	45	cores	core	NOUN
futech-534	188	46	)	)	PUNCT
futech-534	188	47	,	,	PUNCT
futech-534	188	48	and	and	CCONJ
futech-534	188	49	256	256	NUM
futech-534	188	50	gb	gb	NOUN
futech-534	188	51	system	system	NOUN
futech-534	188	52	memory	memory	NOUN
futech-534	188	53	.	.	PUNCT
futech-534	189	1	the	the	DET
futech-534	189	2	software	software	NOUN
futech-534	189	3	environment	environment	NOUN
futech-534	189	4	comprised	comprise	VERB
futech-534	189	5	python	python	NOUN
futech-534	189	6	3.11	3.11	NUM
futech-534	189	7	,	,	PUNCT
futech-534	189	8	tensorflow	tensorflow	NOUN
futech-534	189	9	2.15	2.15	NUM
futech-534	189	10	,	,	PUNCT
futech-534	189	11	keras	keras	PROPN
futech-534	189	12	3.0	3.0	NUM
futech-534	189	13	,	,	PUNCT
futech-534	189	14	and	and	CCONJ
futech-534	189	15	optuna	optuna	ADP
futech-534	189	16	3.4	3.4	NUM
futech-534	189	17	for	for	ADP
futech-534	189	18	hyperparameter	hyperparameter	NOUN
futech-534	189	19	optimization	optimization	NOUN
futech-534	189	20	.	.	PUNCT
futech-534	190	1	the	the	DET
futech-534	190	2	dataset	dataset	NOUN
futech-534	190	3	was	be	AUX
futech-534	190	4	partitioned	partition	VERB
futech-534	190	5	into	into	ADP
futech-534	190	6	70	70	NUM
futech-534	190	7	%	%	NOUN
futech-534	190	8	training	training	NOUN
futech-534	190	9	,	,	PUNCT
futech-534	190	10	15	15	NUM
futech-534	190	11	%	%	NOUN
futech-534	190	12	validation	validation	NOUN
futech-534	190	13	,	,	PUNCT
futech-534	190	14	and	and	CCONJ
futech-534	190	15	15	15	NUM
futech-534	190	16	%	%	NOUN
futech-534	190	17	testing	testing	NOUN
futech-534	190	18	subsets	subset	NOUN
futech-534	190	19	.	.	PUNCT
futech-534	191	1	to	to	PART
futech-534	191	2	ensure	ensure	VERB
futech-534	191	3	robustness	robustness	NOUN
futech-534	191	4	,	,	PUNCT
futech-534	191	5	a	a	DET
futech-534	191	6	five	five	NUM
futech-534	191	7	-	-	ADJ
futech-534	191	8	fold	fold	ADJ
futech-534	191	9	cross	cross	ADJ
futech-534	191	10	-	-	ADJ
futech-534	191	11	validation	validation	ADJ
futech-534	191	12	strategy	strategy	NOUN
futech-534	191	13	was	be	AUX
futech-534	191	14	employed	employ	VERB
futech-534	191	15	,	,	PUNCT
futech-534	191	16	and	and	CCONJ
futech-534	191	17	model	model	NOUN
futech-534	191	18	parameters	parameter	NOUN
futech-534	191	19	were	be	AUX
futech-534	191	20	tuned	tune	VERB
futech-534	191	21	via	via	ADP
futech-534	191	22	bayesian	bayesian	NOUN
futech-534	191	23	optimization	optimization	NOUN
futech-534	191	24	with	with	ADP
futech-534	191	25	tree	tree	NOUN
futech-534	191	26	-	-	PUNCT
futech-534	191	27	structured	structure	VERB
futech-534	191	28	parzen	parzen	NOUN
futech-534	191	29	estimator	estimator	NOUN
futech-534	191	30	(	(	PUNCT
futech-534	191	31	tpe	tpe	NOUN
futech-534	191	32	)	)	PUNCT
futech-534	191	33	.	.	PUNCT
futech-534	192	1	each	each	DET
futech-534	192	2	experiment	experiment	NOUN
futech-534	192	3	was	be	AUX
futech-534	192	4	executed	execute	VERB
futech-534	192	5	three	three	NUM
futech-534	192	6	times	time	NOUN
futech-534	192	7	,	,	PUNCT
futech-534	192	8	and	and	CCONJ
futech-534	192	9	the	the	DET
futech-534	192	10	results	result	NOUN
futech-534	192	11	were	be	AUX
futech-534	192	12	averaged	average	VERB
futech-534	192	13	to	to	PART
futech-534	192	14	mitigate	mitigate	VERB
futech-534	192	15	random	random	ADJ
futech-534	192	16	variation	variation	NOUN
futech-534	192	17	effects	effect	NOUN
futech-534	192	18	.	.	PUNCT
futech-534	193	1	the	the	DET
futech-534	193	2	following	follow	VERB
futech-534	193	3	baseline	baseline	NOUN
futech-534	193	4	models	model	NOUN
futech-534	193	5	were	be	AUX
futech-534	193	6	implemented	implement	VERB
futech-534	193	7	for	for	ADP
futech-534	193	8	comparison	comparison	NOUN
futech-534	193	9	:	:	PUNCT
futech-534	193	10	•	•	NOUN
futech-534	193	11	gated	gate	VERB
futech-534	193	12	recurrent	recurrent	ADJ
futech-534	193	13	unit	unit	NOUN
futech-534	193	14	(	(	PUNCT
futech-534	193	15	gru	gru	PROPN
futech-534	193	16	)	)	PUNCT
futech-534	193	17	–	–	PUNCT
futech-534	193	18	a	a	DET
futech-534	193	19	recurrent	recurrent	ADJ
futech-534	193	20	architecture	architecture	NOUN
futech-534	193	21	for	for	ADP
futech-534	193	22	sequence	sequence	NOUN
futech-534	193	23	modeling	modeling	NOUN
futech-534	193	24	with	with	ADP
futech-534	193	25	fewer	few	ADJ
futech-534	193	26	parameters	parameter	NOUN
futech-534	193	27	than	than	ADP
futech-534	193	28	lstm	lstm	ADJ
futech-534	193	29	.	.	PUNCT
futech-534	194	1	•	•	NUM
futech-534	194	2	long	long	ADJ
futech-534	194	3	short	short	ADJ
futech-534	194	4	-	-	PUNCT
futech-534	194	5	term	term	NOUN
futech-534	194	6	memory	memory	NOUN
futech-534	194	7	(	(	PUNCT
futech-534	194	8	lstm	lstm	NOUN
futech-534	194	9	)	)	PUNCT
futech-534	194	10	–	–	PUNCT
futech-534	194	11	a	a	DET
futech-534	194	12	classic	classic	ADJ
futech-534	194	13	deep	deep	ADJ
futech-534	194	14	-	-	PUNCT
futech-534	194	15	learning	learn	VERB
futech-534	194	16	approach	approach	NOUN
futech-534	194	17	for	for	ADP
futech-534	194	18	temporal	temporal	ADJ
futech-534	194	19	pattern	pattern	NOUN
futech-534	194	20	recognition	recognition	NOUN
futech-534	194	21	.	.	PUNCT
futech-534	195	1	•	•	NUM
futech-534	195	2	decision	decision	NOUN
futech-534	195	3	tree	tree	NOUN
futech-534	195	4	(	(	PUNCT
futech-534	195	5	dt	dt	NOUN
futech-534	195	6	)	)	PUNCT
futech-534	195	7	–	–	PUNCT
futech-534	195	8	a	a	DET
futech-534	195	9	non	non	ADJ
futech-534	195	10	-	-	ADJ
futech-534	195	11	parametric	parametric	ADJ
futech-534	195	12	algorithm	algorithm	NOUN
futech-534	195	13	used	use	VERB
futech-534	195	14	for	for	ADP
futech-534	195	15	interpretable	interpretable	ADJ
futech-534	195	16	forecasting	forecasting	NOUN
futech-534	195	17	with	with	ADP
futech-534	195	18	low	low	ADJ
futech-534	195	19	computational	computational	ADJ
futech-534	195	20	cost	cost	NOUN
futech-534	195	21	.	.	PUNCT
futech-534	196	1	•	•	NUM
futech-534	196	2	acquired	acquire	VERB
futech-534	196	3	(	(	PUNCT
futech-534	196	4	proposed	propose	VERB
futech-534	196	5	htl	htl	PROPN
futech-534	196	6	-	-	PUNCT
futech-534	196	7	hpo	hpo	PROPN
futech-534	196	8	)	)	PUNCT
futech-534	196	9	–	–	PUNCT
futech-534	196	10	the	the	DET
futech-534	196	11	hierarchical	hierarchical	ADJ
futech-534	196	12	transfer	transfer	NOUN
futech-534	196	13	learning	learning	NOUN
futech-534	196	14	model	model	NOUN
futech-534	196	15	optimized	optimize	VERB
futech-534	196	16	through	through	ADP
futech-534	196	17	bayesian	bayesian	NOUN
futech-534	196	18	tuning	tuning	NOUN
futech-534	196	19	.	.	PUNCT
futech-534	197	1	all	all	DET
futech-534	197	2	models	model	NOUN
futech-534	197	3	were	be	AUX
futech-534	197	4	evaluated	evaluate	VERB
futech-534	197	5	using	use	VERB
futech-534	197	6	five	five	NUM
futech-534	197	7	metrics	metric	NOUN
futech-534	197	8	—	—	PUNCT
futech-534	197	9	mean	mean	VERB
futech-534	197	10	squared	square	VERB
futech-534	197	11	error	error	NOUN
futech-534	197	12	(	(	PUNCT
futech-534	197	13	mse	mse	NOUN
futech-534	197	14	)	)	PUNCT
futech-534	197	15	,	,	PUNCT
futech-534	197	16	root	root	NOUN
futech-534	197	17	mean	mean	VERB
futech-534	197	18	squared	square	VERB
futech-534	197	19	error	error	NOUN
futech-534	197	20	(	(	PUNCT
futech-534	197	21	rmse	rmse	NOUN
futech-534	197	22	)	)	PUNCT
futech-534	197	23	,	,	PUNCT
futech-534	197	24	r²	r²	NOUN
futech-534	197	25	,	,	PUNCT
futech-534	197	26	mean	mean	ADJ
futech-534	197	27	absolute	absolute	ADJ
futech-534	197	28	error	error	NOUN
futech-534	197	29	(	(	PUNCT
futech-534	197	30	mae	mae	PROPN
futech-534	197	31	)	)	PUNCT
futech-534	197	32	,	,	PUNCT
futech-534	197	33	and	and	CCONJ
futech-534	197	34	explained	explain	VERB
futech-534	197	35	variance	variance	NOUN
futech-534	197	36	(	(	PUNCT
futech-534	197	37	ev	ev	PROPN
futech-534	197	38	)	)	PUNCT
futech-534	197	39	.	.	PUNCT
futech-534	198	1	these	these	DET
futech-534	198	2	indicators	indicator	NOUN
futech-534	198	3	collectively	collectively	ADV
futech-534	198	4	represent	represent	VERB
futech-534	198	5	model	model	NOUN
futech-534	198	6	accuracy	accuracy	NOUN
futech-534	198	7	,	,	PUNCT
futech-534	198	8	stability	stability	NOUN
futech-534	198	9	,	,	PUNCT
futech-534	198	10	and	and	CCONJ
futech-534	198	11	fit	fit	ADJ
futech-534	198	12	quality	quality	NOUN
futech-534	198	13	.	.	PUNCT
futech-534	199	1	4.2	4.2	NUM
futech-534	199	2	mathematical	mathematical	ADJ
futech-534	199	3	background	background	NOUN
futech-534	199	4	of	of	ADP
futech-534	199	5	evaluation	evaluation	NOUN
futech-534	199	6	metrics	metric	NOUN
futech-534	199	7	to	to	PART
futech-534	199	8	ensure	ensure	VERB
futech-534	199	9	methodological	methodological	ADJ
futech-534	199	10	rigor	rigor	NOUN
futech-534	199	11	,	,	PUNCT
futech-534	199	12	performance	performance	NOUN
futech-534	199	13	metrics	metric	NOUN
futech-534	199	14	were	be	AUX
futech-534	199	15	computed	compute	VERB
futech-534	199	16	using	use	VERB
futech-534	199	17	the	the	DET
futech-534	199	18	following	follow	VERB
futech-534	199	19	formulations	formulation	NOUN
futech-534	199	20	:	:	PUNCT
futech-534	199	21	𝑀𝑆𝐸⁡=	𝑀𝑆𝐸⁡=	PROPN
futech-534	199	22	1	1	NUM
futech-534	199	23	𝑁	𝑁	PROPN
futech-534	199	24	∑	∑	PART
futech-534	199	25	 	 	SPACE
futech-534	199	26	𝑁	𝑁	PROPN
futech-534	199	27	𝑖=1	𝑖=1	PROPN
futech-534	199	28	  	  	SPACE
futech-534	199	29	(	(	PUNCT
futech-534	199	30	𝑦𝑖	𝑦𝑖	PROPN
futech-534	199	31	−	−	PROPN
futech-534	199	32	�	�	PROPN
futech-534	199	33	̂	̂	VERB
futech-534	199	34	�	�	NOUN
futech-534	199	35	𝑖	𝑖	NOUN
futech-534	199	36	)	)	PUNCT
futech-534	199	37	2	2	NUM
futech-534	199	38	𝑅𝑀𝑆𝐸⁡=	𝑅𝑀𝑆𝐸⁡=	PART
futech-534	199	39	√	√	NOUN
futech-534	199	40	1	1	NUM
futech-534	199	41	𝑁	𝑁	PROPN
futech-534	199	42	∑	∑	DET
futech-534	199	43	 	 	SPACE
futech-534	199	44	𝑁	𝑁	PROPN
futech-534	199	45	𝑖=1	𝑖=1	PROPN
futech-534	199	46	  	  	SPACE
futech-534	199	47	(	(	PUNCT
futech-534	199	48	𝑦𝑖	𝑦𝑖	PROPN
futech-534	199	49	−	−	PROPN
futech-534	199	50	�	�	PROPN
futech-534	199	51	̂	̂	VERB
futech-534	199	52	�	�	NOUN
futech-534	199	53	𝑖	𝑖	SYM
futech-534	199	54	)	)	PUNCT
futech-534	199	55	2	2	NUM
futech-534	200	1	𝑀𝐴𝐸⁡=	𝑀𝐴𝐸⁡=	PROPN
futech-534	200	2	1	1	NUM
futech-534	200	3	𝑁	𝑁	PROPN
futech-534	200	4	∑	∑	PART
futech-534	200	5	 	 	SPACE
futech-534	200	6	𝑁	𝑁	PROPN
futech-534	200	7	𝑖=1	𝑖=1	PROPN
futech-534	200	8	  	  	SPACE
futech-534	200	9	|𝑦𝑖	|𝑦𝑖	X
futech-534	200	10	−	−	PROPN
futech-534	200	11	�	�	PROPN
futech-534	200	12	̂	̂	SYM
futech-534	200	13	�	�	NOUN
futech-534	200	14	𝑖|	𝑖|	NOUN
futech-534	200	15	𝑅2	𝑅2	NOUN
futech-534	200	16	=	=	NOUN
futech-534	200	17	1⁡−	1⁡−	NUM
futech-534	200	18	∑	∑	PART
futech-534	200	19	 	 	SPACE
futech-534	200	20	𝑖	𝑖	SYM
futech-534	200	21	 	 	SPACE
futech-534	200	22	(	(	PUNCT
futech-534	200	23	𝑦𝑖−	𝑦𝑖−	NUM
futech-534	200	24	�	�	PROPN
futech-534	200	25	̂	̂	VERB
futech-534	200	26	�	�	NOUN
futech-534	200	27	𝑖	𝑖	SYM
futech-534	200	28	)	)	PUNCT
futech-534	200	29	2	2	NUM
futech-534	200	30	∑	∑	ADP
futech-534	200	31	 	 	SPACE
futech-534	200	32	𝑖	𝑖	SYM
futech-534	200	33	 	 	SPACE
futech-534	200	34	(	(	PUNCT
futech-534	200	35	𝑦𝑖−𝑦‾	𝑦𝑖−𝑦‾	NOUN
futech-534	200	36	)	)	PUNCT
futech-534	200	37	2	2	NUM
futech-534	200	38	𝐸𝑉	𝐸𝑉	NOUN
futech-534	200	39	=	=	NOUN
futech-534	200	40	1	1	NUM
futech-534	200	41	−	−	PROPN
futech-534	200	42	var(𝑦−	var(𝑦−	PROPN
futech-534	200	43	�	�	PROPN
futech-534	200	44	̂	̂	VERB
futech-534	200	45	�	�	NOUN
futech-534	200	46	)	)	PUNCT
futech-534	200	47	var(𝑦	var(𝑦	PROPN
futech-534	200	48	)	)	PUNCT
futech-534	200	49	(	(	PUNCT
futech-534	200	50	6	6	NUM
futech-534	200	51	)	)	PUNCT
futech-534	200	52	where	where	SCONJ
futech-534	200	53	𝑦𝑖	𝑦𝑖	PROPN
futech-534	200	54	represents	represent	VERB
futech-534	200	55	observed	observe	VERB
futech-534	200	56	cycle	cycle	NOUN
futech-534	200	57	time	time	NOUN
futech-534	200	58	,	,	PUNCT
futech-534	200	59	�	�	PROPN
futech-534	200	60	̂	̂	VERB
futech-534	200	61	�	�	NOUN
futech-534	200	62	𝑖	𝑖	NOUN
futech-534	200	63	is	be	AUX
futech-534	200	64	the	the	DET
futech-534	200	65	predicted	predict	VERB
futech-534	200	66	value	value	NOUN
futech-534	200	67	,	,	PUNCT
futech-534	200	68	and	and	CCONJ
futech-534	200	69	𝑁	𝑁	PROPN
futech-534	200	70	denotes	denote	VERB
futech-534	200	71	the	the	DET
futech-534	200	72	total	total	ADJ
futech-534	200	73	number	number	NOUN
futech-534	200	74	of	of	ADP
futech-534	200	75	observations	observation	NOUN
futech-534	200	76	.	.	PUNCT
futech-534	201	1	lower	low	ADJ
futech-534	201	2	mse	mse	PROPN
futech-534	201	3	,	,	PUNCT
futech-534	201	4	rmse	rmse	NOUN
futech-534	201	5	,	,	PUNCT
futech-534	201	6	and	and	CCONJ
futech-534	201	7	mae	mae	PROPN
futech-534	201	8	values	value	NOUN
futech-534	201	9	indicate	indicate	VERB
futech-534	201	10	higher	high	ADJ
futech-534	201	11	accuracy	accuracy	NOUN
futech-534	201	12	,	,	PUNCT
futech-534	201	13	whereas	whereas	SCONJ
futech-534	201	14	higher	high	ADJ
futech-534	201	15	r2	r2	NOUN
futech-534	201	16	and	and	CCONJ
futech-534	201	17	ev	ev	NOUN
futech-534	201	18	values	value	NOUN
futech-534	201	19	signify	signify	VERB
futech-534	201	20	better	well	ADJ
futech-534	201	21	model	model	NOUN
futech-534	201	22	fit	fit	ADJ
futech-534	201	23	and	and	CCONJ
futech-534	201	24	variance	variance	NOUN
futech-534	201	25	explanation	explanation	NOUN
futech-534	201	26	.	.	PUNCT
futech-534	202	1	4.3	4.3	NUM
futech-534	202	2	baseline	baseline	NOUN
futech-534	202	3	performance	performance	NOUN
futech-534	202	4	overview	overview	NOUN
futech-534	202	5	table	table	NOUN
futech-534	202	6	1	1	NUM
futech-534	202	7	presents	present	VERB
futech-534	202	8	a	a	DET
futech-534	202	9	summary	summary	NOUN
futech-534	202	10	of	of	ADP
futech-534	202	11	model	model	NOUN
futech-534	202	12	performance	performance	NOUN
futech-534	202	13	across	across	ADP
futech-534	202	14	all	all	DET
futech-534	202	15	metrics	metric	NOUN
futech-534	202	16	.	.	PUNCT
futech-534	203	1	table	table	NOUN
futech-534	203	2	1	1	NUM
futech-534	203	3	.	.	PUNCT
futech-534	203	4	comparative	comparative	ADJ
futech-534	203	5	model	model	NOUN
futech-534	203	6	performance	performance	NOUN
futech-534	203	7	across	across	ADP
futech-534	203	8	forecasting	forecasting	NOUN
futech-534	203	9	metrics	metric	NOUN
futech-534	203	10	the	the	DET
futech-534	203	11	results	result	NOUN
futech-534	203	12	indicate	indicate	VERB
futech-534	203	13	that	that	SCONJ
futech-534	203	14	the	the	DET
futech-534	203	15	proposed	propose	VERB
futech-534	203	16	htl	htl	PROPN
futech-534	203	17	-	-	PUNCT
futech-534	203	18	hpo	hpo	PROPN
futech-534	203	19	model	model	NOUN
futech-534	203	20	achieved	achieve	VERB
futech-534	203	21	the	the	DET
futech-534	203	22	best	good	ADJ
futech-534	203	23	performance	performance	NOUN
futech-534	203	24	across	across	ADP
futech-534	203	25	all	all	DET
futech-534	203	26	five	five	NUM
futech-534	203	27	metrics	metric	NOUN
futech-534	203	28	.	.	PUNCT
futech-534	204	1	specifically	specifically	ADV
futech-534	204	2	,	,	PUNCT
futech-534	204	3	it	it	PRON
futech-534	204	4	reduced	reduce	VERB
futech-534	204	5	rmse	rmse	NOUN
futech-534	204	6	by	by	ADP
futech-534	204	7	14.6	14.6	NUM
futech-534	204	8	%	%	NOUN
futech-534	204	9	and	and	CCONJ
futech-534	204	10	mae	mae	PROPN
futech-534	204	11	by	by	ADP
futech-534	204	12	11.2	11.2	NUM
futech-534	204	13	%	%	NOUN
futech-534	204	14	compared	compare	VERB
futech-534	204	15	to	to	ADP
futech-534	204	16	the	the	DET
futech-534	204	17	best	good	ADJ
futech-534	204	18	baseline	baseline	NOUN
futech-534	204	19	(	(	PUNCT
futech-534	204	20	lstm	lstm	NOUN
futech-534	204	21	)	)	PUNCT
futech-534	204	22	,	,	PUNCT
futech-534	204	23	while	while	SCONJ
futech-534	204	24	achieving	achieve	VERB
futech-534	204	25	the	the	DET
futech-534	204	26	highest	high	ADJ
futech-534	204	27	r²	r²	NOUN
futech-534	204	28	(	(	PUNCT
futech-534	204	29	0.934	0.934	NUM
futech-534	204	30	)	)	PUNCT
futech-534	204	31	and	and	CCONJ
futech-534	204	32	explained	explain	VERB
futech-534	204	33	variance	variance	NOUN
futech-534	204	34	(	(	PUNCT
futech-534	204	35	0.938	0.938	NUM
futech-534	204	36	)	)	PUNCT
futech-534	204	37	.	.	PUNCT
futech-534	205	1	these	these	DET
futech-534	205	2	results	result	NOUN
futech-534	205	3	establish	establish	VERB
futech-534	205	4	the	the	DET
futech-534	205	5	proposed	propose	VERB
futech-534	205	6	model	model	NOUN
futech-534	205	7	’s	’s	PART
futech-534	205	8	ability	ability	NOUN
futech-534	205	9	to	to	PART
futech-534	205	10	minimize	minimize	VERB
futech-534	205	11	prediction	prediction	NOUN
futech-534	205	12	errors	error	NOUN
futech-534	205	13	and	and	CCONJ
futech-534	205	14	capture	capture	VERB
futech-534	205	15	underlying	underlying	ADJ
futech-534	205	16	process	process	NOUN
futech-534	205	17	variability	variability	NOUN
futech-534	205	18	more	more	ADV
futech-534	205	19	effectively	effectively	ADV
futech-534	205	20	than	than	ADP
futech-534	205	21	conventional	conventional	ADJ
futech-534	205	22	methods	method	NOUN
futech-534	205	23	.	.	PUNCT
futech-534	206	1	in	in	ADP
futech-534	206	2	addition	addition	NOUN
futech-534	206	3	to	to	ADP
futech-534	206	4	model	model	PROPN
futech-534	206	5	mse	mse	PROPN
futech-534	206	6	rmse	rmse	PROPN
futech-534	206	7	mae	mae	PROPN
futech-534	206	8	r²	r²	NOUN
futech-534	206	9	ev	ev	ADP
futech-534	206	10	decision	decision	NOUN
futech-534	206	11	tree	tree	NOUN
futech-534	206	12	0.008	0.008	NUM
futech-534	206	13	0.087	0.087	NUM
futech-534	206	14	0.074	0.074	NUM
futech-534	206	15	0.919	0.919	NUM
futech-534	206	16	0.920	0.920	NUM
futech-534	206	17	gru	gru	NOUN
futech-534	206	18	0.043	0.043	NUM
futech-534	206	19	0.208	0.208	NUM
futech-534	206	20	0.148	0.148	NUM
futech-534	206	21	0.543	0.543	NUM
futech-534	206	22	0.801	0.801	NUM
futech-534	206	23	lstm	lstm	NOUN
futech-534	206	24	0.016	0.016	NUM
futech-534	206	25	0.127	0.127	NUM
futech-534	206	26	0.087	0.087	NUM
futech-534	206	27	0.829	0.829	NUM
futech-534	206	28	0.808	0.808	NUM
futech-534	207	1	acquired	acquire	VERB
futech-534	207	2	(	(	PUNCT
futech-534	207	3	htl	htl	PROPN
futech-534	207	4	-	-	PUNCT
futech-534	207	5	hpo	hpo	PROPN
futech-534	207	6	)	)	PUNCT
futech-534	207	7	0.006	0.006	NUM
futech-534	207	8	0.079	0.079	NUM
futech-534	207	9	0.058	0.058	NUM
futech-534	207	10	0.934	0.934	NUM
futech-534	208	1	0.938	0.938	NUM
futech-534	208	2	ka	ka	PROPN
futech-534	208	3	.	.	PROPN
futech-534	208	4	kumar	kumar	PROPN
futech-534	208	5	&	&	CCONJ
futech-534	208	6	k.	k.	PROPN
futech-534	208	7	hemachandran	hemachandran	PROPN
futech-534	208	8	/	/	SYM
futech-534	208	9	future	future	ADJ
futech-534	208	10	technology	technology	NOUN
futech-534	208	11	february	february	PROPN
futech-534	208	12	2026|	2026|	NUM
futech-534	208	13	volume	volume	NOUN
futech-534	208	14	05	05	NUM
futech-534	209	1	|	|	ADV
futech-534	209	2	issue	issue	NOUN
futech-534	209	3	01	01	NUM
futech-534	210	1	|	|	ADV
futech-534	210	2	pages	page	VERB
futech-534	210	3	55	55	NUM
futech-534	210	4	-	-	SYM
futech-534	210	5	64	64	NUM
futech-534	210	6	60	60	NUM
futech-534	210	7	the	the	DET
futech-534	210	8	neural	neural	ADJ
futech-534	210	9	and	and	CCONJ
futech-534	210	10	tree	tree	NOUN
futech-534	210	11	-	-	PUNCT
futech-534	210	12	based	base	VERB
futech-534	210	13	benchmarks	benchmark	NOUN
futech-534	210	14	presented	present	VERB
futech-534	210	15	,	,	PUNCT
futech-534	210	16	several	several	ADJ
futech-534	210	17	classical	classical	ADJ
futech-534	210	18	forecasting	forecasting	NOUN
futech-534	210	19	models	model	NOUN
futech-534	210	20	—	—	PUNCT
futech-534	210	21	autoregressive	autoregressive	ADJ
futech-534	210	22	integrated	integrated	ADJ
futech-534	210	23	moving	move	VERB
futech-534	210	24	average	average	NOUN
futech-534	210	25	(	(	PUNCT
futech-534	210	26	arima	arima	PROPN
futech-534	210	27	)	)	PUNCT
futech-534	210	28	,	,	PUNCT
futech-534	210	29	linear	linear	ADJ
futech-534	210	30	regression	regression	NOUN
futech-534	210	31	,	,	PUNCT
futech-534	210	32	random	random	ADJ
futech-534	210	33	forest	forest	NOUN
futech-534	210	34	(	(	PUNCT
futech-534	210	35	rf	rf	NOUN
futech-534	210	36	)	)	PUNCT
futech-534	210	37	,	,	PUNCT
futech-534	210	38	and	and	CCONJ
futech-534	210	39	extreme	extreme	ADJ
futech-534	210	40	gradient	gradient	NOUN
futech-534	210	41	boosting	boost	VERB
futech-534	210	42	(	(	PUNCT
futech-534	210	43	xgboost)—were	xgboost)—were	ADP
futech-534	210	44	also	also	ADV
futech-534	210	45	implemented	implement	VERB
futech-534	210	46	as	as	ADP
futech-534	210	47	auxiliary	auxiliary	ADJ
futech-534	210	48	baselines	baseline	NOUN
futech-534	210	49	to	to	PART
futech-534	210	50	ensure	ensure	VERB
futech-534	210	51	comprehensive	comprehensive	ADJ
futech-534	210	52	evaluation	evaluation	NOUN
futech-534	210	53	.	.	PUNCT
futech-534	211	1	each	each	DET
futech-534	211	2	model	model	NOUN
futech-534	211	3	was	be	AUX
futech-534	211	4	optimized	optimize	VERB
futech-534	211	5	through	through	ADP
futech-534	211	6	crossvalidated	crossvalidate	VERB
futech-534	211	7	parameter	parameter	NOUN
futech-534	211	8	tuning	tuning	NOUN
futech-534	211	9	.	.	PUNCT
futech-534	212	1	however	however	ADV
futech-534	212	2	,	,	PUNCT
futech-534	212	3	these	these	DET
futech-534	212	4	traditional	traditional	ADJ
futech-534	212	5	approaches	approach	NOUN
futech-534	212	6	exhibited	exhibit	VERB
futech-534	212	7	substantially	substantially	ADV
futech-534	212	8	higher	high	ADJ
futech-534	212	9	prediction	prediction	NOUN
futech-534	212	10	errors	error	NOUN
futech-534	212	11	under	under	ADP
futech-534	212	12	the	the	DET
futech-534	212	13	same	same	ADJ
futech-534	212	14	experimental	experimental	ADJ
futech-534	212	15	settings	setting	NOUN
futech-534	212	16	,	,	PUNCT
futech-534	212	17	with	with	ADP
futech-534	212	18	rmse	rmse	ADJ
futech-534	212	19	values	value	NOUN
futech-534	212	20	exceeding	exceed	VERB
futech-534	212	21	0.10	0.10	NUM
futech-534	212	22	and	and	CCONJ
futech-534	212	23	r²	r²	VERB
futech-534	212	24	scores	score	NOUN
futech-534	212	25	below	below	ADP
futech-534	212	26	0.80	0.80	NUM
futech-534	212	27	,	,	PUNCT
futech-534	212	28	indicating	indicate	VERB
futech-534	212	29	limited	limited	ADJ
futech-534	212	30	capability	capability	NOUN
futech-534	212	31	to	to	PART
futech-534	212	32	capture	capture	VERB
futech-534	212	33	nonlinear	nonlinear	ADJ
futech-534	212	34	temporal	temporal	ADJ
futech-534	212	35	–	–	PUNCT
futech-534	212	36	spatial	spatial	ADJ
futech-534	212	37	dependencies	dependency	NOUN
futech-534	212	38	inherent	inherent	ADJ
futech-534	212	39	in	in	ADP
futech-534	212	40	wafer	wafer	NOUN
futech-534	212	41	-	-	PUNCT
futech-534	212	42	fab	fab	NOUN
futech-534	212	43	data	datum	NOUN
futech-534	212	44	.	.	PUNCT
futech-534	213	1	because	because	SCONJ
futech-534	213	2	their	their	PRON
futech-534	213	3	performance	performance	NOUN
futech-534	213	4	lagged	lag	VERB
futech-534	213	5	considerably	considerably	ADV
futech-534	213	6	behind	behind	ADP
futech-534	213	7	the	the	DET
futech-534	213	8	deep	deep	ADJ
futech-534	213	9	and	and	CCONJ
futech-534	213	10	transfer	transfer	NOUN
futech-534	213	11	-	-	PUNCT
futech-534	213	12	learning	learn	VERB
futech-534	213	13	models	model	NOUN
futech-534	213	14	,	,	PUNCT
futech-534	213	15	the	the	DET
futech-534	213	16	detailed	detail	VERB
futech-534	213	17	numeric	numeric	ADJ
futech-534	213	18	results	result	NOUN
futech-534	213	19	are	be	AUX
futech-534	213	20	omitted	omit	VERB
futech-534	213	21	for	for	ADP
futech-534	213	22	brevity	brevity	NOUN
futech-534	213	23	.	.	PUNCT
futech-534	214	1	nevertheless	nevertheless	ADV
futech-534	214	2	,	,	PUNCT
futech-534	214	3	their	their	PRON
futech-534	214	4	inclusion	inclusion	NOUN
futech-534	214	5	in	in	ADP
futech-534	214	6	preliminary	preliminary	ADJ
futech-534	214	7	trials	trial	NOUN
futech-534	214	8	confirms	confirm	VERB
futech-534	214	9	that	that	SCONJ
futech-534	214	10	the	the	DET
futech-534	214	11	proposed	propose	VERB
futech-534	214	12	htl	htl	PROPN
futech-534	214	13	-	-	PUNCT
futech-534	214	14	hpo	hpo	PROPN
futech-534	214	15	framework	framework	NOUN
futech-534	214	16	surpasses	surpass	VERB
futech-534	214	17	both	both	DET
futech-534	214	18	conventional	conventional	ADJ
futech-534	214	19	statistical	statistical	ADJ
futech-534	214	20	and	and	CCONJ
futech-534	214	21	machine	machine	NOUN
futech-534	214	22	-	-	PUNCT
futech-534	214	23	learning	learn	VERB
futech-534	214	24	methods	method	NOUN
futech-534	214	25	in	in	ADP
futech-534	214	26	forecasting	forecasting	NOUN
futech-534	214	27	accuracy	accuracy	NOUN
futech-534	214	28	,	,	PUNCT
futech-534	214	29	generalization	generalization	NOUN
futech-534	214	30	,	,	PUNCT
futech-534	214	31	and	and	CCONJ
futech-534	214	32	robustness	robustness	NOUN
futech-534	214	33	.	.	PUNCT
futech-534	215	1	4.4	4.4	NUM
futech-534	215	2	analysis	analysis	NOUN
futech-534	215	3	of	of	ADP
futech-534	215	4	mean	mean	ADJ
futech-534	215	5	squared	square	VERB
futech-534	215	6	and	and	CCONJ
futech-534	215	7	root	root	NOUN
futech-534	215	8	mean	mean	VERB
futech-534	215	9	squared	square	VERB
futech-534	215	10	errors	error	NOUN
futech-534	215	11	mean	mean	VERB
futech-534	215	12	squared	square	VERB
futech-534	215	13	error	error	NOUN
futech-534	215	14	(	(	PUNCT
futech-534	215	15	mse	mse	NOUN
futech-534	215	16	)	)	PUNCT
futech-534	215	17	and	and	CCONJ
futech-534	215	18	root	root	NOUN
futech-534	215	19	mean	mean	VERB
futech-534	215	20	squared	square	VERB
futech-534	215	21	error	error	NOUN
futech-534	215	22	(	(	PUNCT
futech-534	215	23	rmse	rmse	NOUN
futech-534	215	24	)	)	PUNCT
futech-534	215	25	are	be	AUX
futech-534	215	26	widely	widely	ADV
futech-534	215	27	used	use	VERB
futech-534	215	28	measures	measure	NOUN
futech-534	215	29	for	for	ADP
futech-534	215	30	forecasting	forecasting	NOUN
futech-534	215	31	accuracy	accuracy	NOUN
futech-534	215	32	.	.	PUNCT
futech-534	216	1	lower	low	ADJ
futech-534	216	2	values	value	NOUN
futech-534	216	3	signify	signify	VERB
futech-534	216	4	a	a	DET
futech-534	216	5	model	model	NOUN
futech-534	216	6	’s	’s	PART
futech-534	216	7	ability	ability	NOUN
futech-534	216	8	to	to	PART
futech-534	216	9	minimize	minimize	VERB
futech-534	216	10	large	large	ADJ
futech-534	216	11	deviations	deviation	NOUN
futech-534	216	12	between	between	ADP
futech-534	216	13	actual	actual	ADJ
futech-534	216	14	and	and	CCONJ
futech-534	216	15	predicted	predict	VERB
futech-534	216	16	cycle	cycle	NOUN
futech-534	216	17	times	time	NOUN
futech-534	216	18	.	.	PUNCT
futech-534	217	1	figure	figure	NOUN
futech-534	217	2	2	2	NUM
futech-534	217	3	illustrates	illustrate	VERB
futech-534	217	4	the	the	DET
futech-534	217	5	comparative	comparative	ADJ
futech-534	217	6	mse	mse	NOUN
futech-534	217	7	results	result	NOUN
futech-534	217	8	,	,	PUNCT
futech-534	217	9	showing	show	VERB
futech-534	217	10	that	that	SCONJ
futech-534	217	11	gru	gru	NOUN
futech-534	217	12	performed	perform	VERB
futech-534	217	13	the	the	DET
futech-534	217	14	poorest	poor	ADJ
futech-534	217	15	(	(	PUNCT
futech-534	217	16	mse	mse	NOUN
futech-534	217	17	=	=	SYM
futech-534	217	18	0.043	0.043	NUM
futech-534	217	19	)	)	PUNCT
futech-534	217	20	,	,	PUNCT
futech-534	217	21	followed	follow	VERB
futech-534	217	22	by	by	ADP
futech-534	217	23	lstm	lstm	NOUN
futech-534	217	24	(	(	PUNCT
futech-534	217	25	0.016	0.016	NUM
futech-534	217	26	)	)	PUNCT
futech-534	217	27	,	,	PUNCT
futech-534	217	28	while	while	SCONJ
futech-534	217	29	decision	decision	NOUN
futech-534	217	30	tree	tree	NOUN
futech-534	217	31	achieved	achieve	VERB
futech-534	217	32	moderate	moderate	ADJ
futech-534	217	33	accuracy	accuracy	NOUN
futech-534	217	34	(	(	PUNCT
futech-534	217	35	0.008	0.008	NUM
futech-534	217	36	)	)	PUNCT
futech-534	217	37	.	.	PUNCT
futech-534	218	1	the	the	DET
futech-534	218	2	proposed	propose	VERB
futech-534	218	3	acquired	acquire	VERB
futech-534	218	4	model	model	NOUN
futech-534	218	5	achieved	achieve	VERB
futech-534	218	6	the	the	DET
futech-534	218	7	lowest	low	ADJ
futech-534	218	8	mse	mse	NOUN
futech-534	218	9	(	(	PUNCT
futech-534	218	10	0.006	0.006	NUM
futech-534	218	11	)	)	PUNCT
futech-534	218	12	,	,	PUNCT
futech-534	218	13	indicating	indicate	VERB
futech-534	218	14	its	its	PRON
futech-534	218	15	superior	superior	ADJ
futech-534	218	16	stability	stability	NOUN
futech-534	218	17	and	and	CCONJ
futech-534	218	18	accuracy	accuracy	NOUN
futech-534	218	19	.	.	PUNCT
futech-534	219	1	figure	figure	VERB
futech-534	219	2	3	3	NUM
futech-534	219	3	presents	present	NOUN
futech-534	219	4	rmse	rmse	NOUN
futech-534	219	5	comparisons	comparison	NOUN
futech-534	219	6	,	,	PUNCT
futech-534	219	7	with	with	ADP
futech-534	219	8	similar	similar	ADJ
futech-534	219	9	trends	trend	NOUN
futech-534	219	10	.	.	PUNCT
futech-534	220	1	the	the	DET
futech-534	220	2	gru	gru	PROPN
futech-534	220	3	’s	’s	PART
futech-534	220	4	high	high	ADJ
futech-534	220	5	rmse	rmse	NOUN
futech-534	220	6	(	(	PUNCT
futech-534	220	7	0.208	0.208	NUM
futech-534	220	8	)	)	PUNCT
futech-534	220	9	indicates	indicate	VERB
futech-534	220	10	greater	great	ADJ
futech-534	220	11	error	error	NOUN
futech-534	220	12	variability	variability	NOUN
futech-534	220	13	,	,	PUNCT
futech-534	220	14	while	while	SCONJ
futech-534	220	15	the	the	DET
futech-534	220	16	lstm	lstm	NOUN
futech-534	220	17	(	(	PUNCT
futech-534	220	18	0.127	0.127	NUM
futech-534	220	19	)	)	PUNCT
futech-534	220	20	offers	offer	VERB
futech-534	220	21	better	well	ADJ
futech-534	220	22	consistency	consistency	NOUN
futech-534	220	23	.	.	PUNCT
futech-534	221	1	the	the	DET
futech-534	221	2	htl	htl	PROPN
futech-534	221	3	-	-	PUNCT
futech-534	221	4	hpo	hpo	PROPN
futech-534	221	5	framework	framework	NOUN
futech-534	221	6	attained	attain	VERB
futech-534	221	7	the	the	DET
futech-534	221	8	lowest	low	ADJ
futech-534	221	9	rmse	rmse	NOUN
futech-534	221	10	(	(	PUNCT
futech-534	221	11	0.079	0.079	NUM
futech-534	221	12	)	)	PUNCT
futech-534	221	13	,	,	PUNCT
futech-534	221	14	confirming	confirm	VERB
futech-534	221	15	that	that	SCONJ
futech-534	221	16	hierarchical	hierarchical	ADJ
futech-534	221	17	learning	learning	NOUN
futech-534	221	18	and	and	CCONJ
futech-534	221	19	bayesian	bayesian	NOUN
futech-534	221	20	optimization	optimization	NOUN
futech-534	221	21	effectively	effectively	ADV
futech-534	221	22	reduce	reduce	VERB
futech-534	221	23	prediction	prediction	NOUN
futech-534	221	24	variance	variance	NOUN
futech-534	221	25	and	and	CCONJ
futech-534	221	26	generalization	generalization	NOUN
futech-534	221	27	errors	error	NOUN
futech-534	221	28	.	.	PUNCT
futech-534	222	1	figure	figure	NOUN
futech-534	222	2	2	2	NUM
futech-534	222	3	.	.	PUNCT
futech-534	222	4	bar	bar	NOUN
futech-534	222	5	graph	graph	NOUN
futech-534	222	6	for	for	ADP
futech-534	222	7	mean	mean	ADJ
futech-534	222	8	squared	square	VERB
futech-534	222	9	error	error	NOUN
futech-534	222	10	figure	figure	NOUN
futech-534	222	11	3	3	NUM
futech-534	222	12	.	.	PUNCT
futech-534	222	13	bar	bar	NOUN
futech-534	222	14	graph	graph	NOUN
futech-534	222	15	for	for	ADP
futech-534	222	16	root	root	NOUN
futech-534	222	17	mean	mean	NOUN
futech-534	222	18	squared	square	VERB
futech-534	222	19	error	error	NOUN
futech-534	222	20	4.5	4.5	NUM
futech-534	222	21	coefficient	coefficient	NOUN
futech-534	222	22	of	of	ADP
futech-534	222	23	determination	determination	NOUN
futech-534	222	24	(	(	PUNCT
futech-534	222	25	r²	r²	NOUN
futech-534	222	26	)	)	PUNCT
futech-534	222	27	and	and	CCONJ
futech-534	222	28	explained	explain	VERB
futech-534	222	29	variance	variance	NOUN
futech-534	222	30	the	the	DET
futech-534	222	31	r²	r²	ADJ
futech-534	222	32	metric	metric	ADJ
futech-534	222	33	evaluates	evaluate	NOUN
futech-534	222	34	how	how	SCONJ
futech-534	222	35	well	well	ADV
futech-534	222	36	the	the	DET
futech-534	222	37	model	model	NOUN
futech-534	222	38	explains	explain	VERB
futech-534	222	39	the	the	DET
futech-534	222	40	variability	variability	NOUN
futech-534	222	41	in	in	ADP
futech-534	222	42	observed	observe	VERB
futech-534	222	43	cycle	cycle	NOUN
futech-534	222	44	times	time	NOUN
futech-534	222	45	.	.	PUNCT
futech-534	223	1	a	a	DET
futech-534	223	2	higher	high	ADJ
futech-534	223	3	r²	r²	NOUN
futech-534	223	4	implies	imply	VERB
futech-534	223	5	that	that	PRON
futech-534	223	6	predicted	predict	VERB
futech-534	223	7	values	value	NOUN
futech-534	223	8	closely	closely	ADV
futech-534	223	9	align	align	VERB
futech-534	223	10	with	with	ADP
futech-534	223	11	actual	actual	ADJ
futech-534	223	12	measurements	measurement	NOUN
futech-534	223	13	.	.	PUNCT
futech-534	224	1	figure	figure	VERB
futech-534	224	2	4	4	NUM
futech-534	224	3	reveals	reveal	VERB
futech-534	224	4	that	that	SCONJ
futech-534	224	5	gru	gru	NOUN
futech-534	224	6	achieved	achieve	VERB
futech-534	224	7	an	an	DET
futech-534	224	8	r²	r²	NOUN
futech-534	224	9	of	of	ADP
futech-534	224	10	only	only	ADV
futech-534	224	11	0.543	0.543	NUM
futech-534	224	12	,	,	PUNCT
futech-534	224	13	highlighting	highlight	VERB
futech-534	224	14	poor	poor	ADJ
futech-534	224	15	variance	variance	NOUN
futech-534	224	16	explanation	explanation	NOUN
futech-534	224	17	and	and	CCONJ
futech-534	224	18	significant	significant	ADJ
futech-534	224	19	underfitting	underfitting	NOUN
futech-534	224	20	.	.	PUNCT
futech-534	225	1	lstm	lstm	NOUN
futech-534	225	2	performed	perform	VERB
futech-534	225	3	moderately	moderately	ADV
futech-534	225	4	(	(	PUNCT
futech-534	225	5	r²	r²	VERB
futech-534	225	6	=	=	NOUN
futech-534	225	7	0.829	0.829	NUM
futech-534	225	8	)	)	PUNCT
futech-534	225	9	,	,	PUNCT
futech-534	225	10	while	while	SCONJ
futech-534	225	11	the	the	DET
futech-534	225	12	decision	decision	NOUN
futech-534	225	13	tree	tree	NOUN
futech-534	225	14	achieved	achieve	VERB
futech-534	225	15	0.919	0.919	NUM
futech-534	225	16	.	.	PUNCT
futech-534	226	1	the	the	DET
futech-534	226	2	proposed	propose	VERB
futech-534	226	3	htl	htl	PROPN
futech-534	226	4	-	-	PUNCT
futech-534	226	5	hpo	hpo	PROPN
futech-534	226	6	model	model	NOUN
futech-534	226	7	achieved	achieve	VERB
futech-534	226	8	an	an	DET
futech-534	226	9	r²	r²	NOUN
futech-534	226	10	of	of	ADP
futech-534	226	11	0.934	0.934	NUM
futech-534	226	12	,	,	PUNCT
futech-534	226	13	demonstrating	demonstrate	VERB
futech-534	226	14	its	its	PRON
futech-534	226	15	strong	strong	ADJ
futech-534	226	16	capacity	capacity	NOUN
futech-534	226	17	to	to	PART
futech-534	226	18	capture	capture	VERB
futech-534	226	19	interdependencies	interdependency	NOUN
futech-534	226	20	between	between	ADP
futech-534	226	21	process	process	NOUN
futech-534	226	22	parameters	parameter	NOUN
futech-534	226	23	and	and	CCONJ
futech-534	226	24	predict	predict	VERB
futech-534	226	25	future	future	ADJ
futech-534	226	26	cycle	cycle	NOUN
futech-534	226	27	times	time	NOUN
futech-534	226	28	.	.	PUNCT
futech-534	227	1	explained	explain	VERB
futech-534	227	2	variance	variance	NOUN
futech-534	227	3	(	(	PUNCT
futech-534	227	4	ev	ev	NOUN
futech-534	227	5	)	)	PUNCT
futech-534	227	6	complements	complement	NOUN
futech-534	227	7	r²	r²	VERB
futech-534	227	8	by	by	ADP
futech-534	227	9	quantifying	quantify	VERB
futech-534	227	10	the	the	DET
futech-534	227	11	proportion	proportion	NOUN
futech-534	227	12	of	of	ADP
futech-534	227	13	data	datum	NOUN
futech-534	227	14	variance	variance	NOUN
futech-534	227	15	explained	explain	VERB
futech-534	227	16	by	by	ADP
futech-534	227	17	the	the	DET
futech-534	227	18	predictive	predictive	ADJ
futech-534	227	19	model	model	NOUN
futech-534	227	20	.	.	PUNCT
futech-534	228	1	as	as	SCONJ
futech-534	228	2	shown	show	VERB
futech-534	228	3	in	in	ADP
futech-534	228	4	figure	figure	NOUN
futech-534	228	5	5	5	NUM
futech-534	228	6	,	,	PUNCT
futech-534	228	7	the	the	DET
futech-534	228	8	proposed	propose	VERB
futech-534	228	9	approach	approach	NOUN
futech-534	228	10	achieved	achieve	VERB
futech-534	228	11	an	an	DET
futech-534	228	12	ev	ev	NOUN
futech-534	228	13	of	of	ADP
futech-534	228	14	0.938	0.938	NUM
futech-534	228	15	,	,	PUNCT
futech-534	228	16	marginally	marginally	ADV
futech-534	228	17	outperforming	outperform	VERB
futech-534	228	18	the	the	DET
futech-534	228	19	decision	decision	NOUN
futech-534	228	20	tree	tree	NOUN
futech-534	228	21	(	(	PUNCT
futech-534	228	22	0.920	0.920	NUM
futech-534	228	23	)	)	PUNCT
futech-534	228	24	.	.	PUNCT
futech-534	229	1	this	this	DET
futech-534	229	2	improvement	improvement	NOUN
futech-534	229	3	reflects	reflect	VERB
futech-534	229	4	htl	htl	PROPN
futech-534	229	5	-	-	PUNCT
futech-534	229	6	hpo	hpo	PROPN
futech-534	229	7	’s	’s	PART
futech-534	229	8	enhanced	enhance	VERB
futech-534	229	9	ability	ability	NOUN
futech-534	229	10	to	to	PART
futech-534	229	11	model	model	VERB
futech-534	229	12	non	non	ADJ
futech-534	229	13	-	-	ADJ
futech-534	229	14	linear	linear	ADJ
futech-534	229	15	dependencies	dependency	NOUN
futech-534	229	16	across	across	ADP
futech-534	229	17	wafer	wafer	NOUN
futech-534	229	18	fabrication	fabrication	NOUN
futech-534	229	19	stages	stage	NOUN
futech-534	229	20	.	.	PUNCT
futech-534	230	1	figure	figure	VERB
futech-534	230	2	4	4	NUM
futech-534	230	3	.	.	PUNCT
futech-534	230	4	bar	bar	NOUN
futech-534	230	5	graph	graph	NOUN
futech-534	230	6	for	for	ADP
futech-534	230	7	r	r	NOUN
futech-534	230	8	-	-	PUNCT
futech-534	230	9	squared	square	VERB
futech-534	230	10	error	error	NOUN
futech-534	230	11	4.6	4.6	NUM
futech-534	230	12	mean	mean	NOUN
futech-534	230	13	absolute	absolute	ADJ
futech-534	230	14	error	error	NOUN
futech-534	230	15	and	and	CCONJ
futech-534	230	16	residual	residual	ADJ
futech-534	230	17	analysis	analysis	NOUN
futech-534	230	18	mean	mean	VERB
futech-534	230	19	absolute	absolute	ADJ
futech-534	230	20	error	error	NOUN
futech-534	230	21	(	(	PUNCT
futech-534	230	22	mae	mae	PROPN
futech-534	230	23	)	)	PUNCT
futech-534	230	24	represents	represent	VERB
futech-534	230	25	the	the	DET
futech-534	230	26	average	average	ADJ
futech-534	230	27	absolute	absolute	ADJ
futech-534	230	28	difference	difference	NOUN
futech-534	230	29	between	between	ADP
futech-534	230	30	predicted	predict	VERB
futech-534	230	31	and	and	CCONJ
futech-534	230	32	true	true	ADJ
futech-534	230	33	values	value	NOUN
futech-534	230	34	.	.	PUNCT
futech-534	231	1	lower	low	ADJ
futech-534	231	2	mae	mae	PROPN
futech-534	231	3	indicates	indicate	VERB
futech-534	231	4	fewer	few	ADJ
futech-534	231	5	large	large	ADJ
futech-534	231	6	errors	error	NOUN
futech-534	231	7	,	,	PUNCT
futech-534	231	8	a	a	DET
futech-534	231	9	desirable	desirable	ADJ
futech-534	231	10	property	property	NOUN
futech-534	231	11	in	in	ADP
futech-534	231	12	industrial	industrial	ADJ
futech-534	231	13	forecasting	forecasting	NOUN
futech-534	231	14	where	where	SCONJ
futech-534	231	15	deviations	deviation	NOUN
futech-534	231	16	translate	translate	VERB
futech-534	231	17	to	to	ADP
futech-534	231	18	scheduling	scheduling	NOUN
futech-534	231	19	inefficiencies	inefficiency	NOUN
futech-534	231	20	.	.	PUNCT
futech-534	232	1	figure	figure	VERB
futech-534	232	2	6	6	NUM
futech-534	232	3	shows	show	VERB
futech-534	232	4	that	that	SCONJ
futech-534	232	5	gru	gru	NOUN
futech-534	232	6	produced	produce	VERB
futech-534	232	7	the	the	DET
futech-534	232	8	highest	high	ADJ
futech-534	232	9	mae	mae	PROPN
futech-534	232	10	(	(	PUNCT
futech-534	232	11	0.148	0.148	NUM
futech-534	232	12	)	)	PUNCT
futech-534	232	13	,	,	PUNCT
futech-534	232	14	indicating	indicate	VERB
futech-534	232	15	substantial	substantial	ADJ
futech-534	232	16	deviation	deviation	NOUN
futech-534	232	17	from	from	ADP
futech-534	232	18	actual	actual	ADJ
futech-534	232	19	outcomes	outcome	NOUN
futech-534	232	20	.	.	PUNCT
futech-534	233	1	lstm	lstm	NOUN
futech-534	233	2	performed	perform	VERB
futech-534	233	3	better	well	ADV
futech-534	233	4	(	(	PUNCT
futech-534	233	5	0.087	0.087	NUM
futech-534	233	6	)	)	PUNCT
futech-534	233	7	,	,	PUNCT
futech-534	233	8	but	but	CCONJ
futech-534	233	9	still	still	ADV
futech-534	233	10	exhibited	exhibit	VERB
futech-534	233	11	high	high	ADJ
futech-534	233	12	bias	bias	NOUN
futech-534	233	13	due	due	ADP
futech-534	233	14	to	to	ADP
futech-534	233	15	sensitivity	sensitivity	NOUN
futech-534	233	16	to	to	ADP
futech-534	233	17	sequence	sequence	NOUN
futech-534	233	18	length	length	NOUN
futech-534	233	19	and	and	CCONJ
futech-534	233	20	learning	learning	NOUN
futech-534	233	21	rate	rate	NOUN
futech-534	233	22	.	.	PUNCT
futech-534	234	1	decision	decision	NOUN
futech-534	234	2	tree	tree	NOUN
futech-534	234	3	achieved	achieve	VERB
futech-534	234	4	0.074	0.074	NUM
futech-534	234	5	,	,	PUNCT
futech-534	234	6	while	while	SCONJ
futech-534	234	7	the	the	DET
futech-534	234	8	proposed	propose	VERB
futech-534	234	9	htlhpo	htlhpo	NOUN
futech-534	234	10	recorded	record	VERB
futech-534	234	11	0.058	0.058	NUM
futech-534	234	12	,	,	PUNCT
futech-534	234	13	validating	validate	VERB
futech-534	234	14	its	its	PRON
futech-534	234	15	superior	superior	ADJ
futech-534	234	16	precision	precision	NOUN
futech-534	234	17	in	in	ADP
futech-534	234	18	predicting	predict	VERB
futech-534	234	19	wafer	wafer	NOUN
futech-534	234	20	processing	processing	NOUN
futech-534	234	21	times	time	NOUN
futech-534	234	22	.	.	PUNCT
futech-534	235	1	residual	residual	ADJ
futech-534	235	2	error	error	NOUN
futech-534	235	3	distribution	distribution	NOUN
futech-534	235	4	analysis	analysis	NOUN
futech-534	235	5	revealed	reveal	VERB
futech-534	235	6	that	that	SCONJ
futech-534	235	7	the	the	DET
futech-534	235	8	htl	htl	PROPN
futech-534	235	9	-	-	PUNCT
futech-534	235	10	hpo	hpo	PROPN
futech-534	235	11	model	model	NOUN
futech-534	235	12	’s	’s	PART
futech-534	235	13	errors	error	NOUN
futech-534	235	14	were	be	AUX
futech-534	235	15	normally	normally	ADV
futech-534	235	16	distributed	distribute	VERB
futech-534	235	17	around	around	ADP
futech-534	235	18	zero	zero	NUM
futech-534	235	19	with	with	ADP
futech-534	235	20	a	a	DET
futech-534	235	21	smaller	small	ADJ
futech-534	235	22	variance	variance	NOUN
futech-534	235	23	(	(	PUNCT
futech-534	235	24	σ²	σ²	NOUN
futech-534	235	25	=	=	SYM
futech-534	235	26	0.0048	0.0048	NUM
futech-534	235	27	)	)	PUNCT
futech-534	235	28	,	,	PUNCT
futech-534	235	29	while	while	SCONJ
futech-534	235	30	other	other	ADJ
futech-534	235	31	models	model	NOUN
futech-534	235	32	showed	show	VERB
futech-534	235	33	skewed	skewed	ADJ
futech-534	235	34	distributions	distribution	NOUN
futech-534	235	35	.	.	PUNCT
futech-534	236	1	this	this	PRON
futech-534	236	2	indicates	indicate	VERB
futech-534	236	3	enhanced	enhanced	ADJ
futech-534	236	4	stability	stability	NOUN
futech-534	236	5	and	and	CCONJ
futech-534	236	6	unbiased	unbiased	ADJ
futech-534	236	7	predictions	prediction	NOUN
futech-534	236	8	.	.	PUNCT
futech-534	237	1	4.7	4.7	NUM
futech-534	237	2	statistical	statistical	ADJ
futech-534	237	3	validation	validation	NOUN
futech-534	237	4	through	through	ADP
futech-534	237	5	paired	pair	VERB
futech-534	237	6	t	t	PROPN
futech-534	237	7	-	-	PUNCT
futech-534	237	8	test	test	NOUN
futech-534	237	9	to	to	PART
futech-534	237	10	ensure	ensure	VERB
futech-534	237	11	that	that	SCONJ
futech-534	237	12	observed	observed	ADJ
futech-534	237	13	improvements	improvement	NOUN
futech-534	237	14	were	be	AUX
futech-534	237	15	statistically	statistically	ADV
futech-534	237	16	significant	significant	ADJ
futech-534	237	17	rather	rather	ADV
futech-534	237	18	than	than	ADP
futech-534	237	19	random	random	ADJ
futech-534	237	20	,	,	PUNCT
futech-534	237	21	a	a	DET
futech-534	237	22	paired	pair	VERB
futech-534	237	23	t	t	NOUN
futech-534	237	24	-	-	PUNCT
futech-534	237	25	test	test	NOUN
futech-534	237	26	was	be	AUX
futech-534	237	27	conducted	conduct	VERB
futech-534	237	28	comparing	compare	VERB
futech-534	237	29	rmse	rmse	ADJ
futech-534	237	30	values	value	NOUN
futech-534	237	31	of	of	ADP
futech-534	237	32	the	the	DET
futech-534	237	33	proposed	propose	VERB
futech-534	237	34	model	model	NOUN
futech-534	237	35	against	against	ADP
futech-534	237	36	each	each	DET
futech-534	237	37	baseline	baseline	NOUN
futech-534	237	38	across	across	ADP
futech-534	237	39	five	five	NUM
futech-534	237	40	folds	fold	NOUN
futech-534	237	41	.	.	PUNCT
futech-534	238	1	all	all	DET
futech-534	238	2	p	p	NOUN
futech-534	238	3	-	-	PUNCT
futech-534	238	4	values	value	NOUN
futech-534	238	5	are	be	AUX
futech-534	238	6	less	less	ADJ
futech-534	238	7	than	than	ADP
futech-534	238	8	0.05	0.05	NUM
futech-534	238	9	,	,	PUNCT
futech-534	238	10	confirming	confirm	VERB
futech-534	238	11	the	the	DET
futech-534	238	12	statistical	statistical	ADJ
futech-534	238	13	significance	significance	NOUN
futech-534	238	14	of	of	ADP
futech-534	238	15	htl	htl	PROPN
futech-534	238	16	-	-	PUNCT
futech-534	238	17	hpo	hpo	PROPN
futech-534	238	18	’s	’s	PART
futech-534	238	19	superior	superior	ADJ
futech-534	238	20	performance	performance	NOUN
futech-534	238	21	.	.	PUNCT
futech-534	239	1	this	this	DET
futech-534	239	2	validation	validation	NOUN
futech-534	239	3	demonstrates	demonstrate	VERB
futech-534	239	4	that	that	SCONJ
futech-534	239	5	the	the	DET
futech-534	239	6	improvements	improvement	NOUN
futech-534	239	7	observed	observe	VERB
futech-534	239	8	are	be	AUX
futech-534	239	9	consistent	consistent	ADJ
futech-534	239	10	and	and	CCONJ
futech-534	239	11	not	not	PART
futech-534	239	12	due	due	ADP
futech-534	239	13	to	to	ADP
futech-534	239	14	stochastic	stochastic	ADJ
futech-534	239	15	model	model	NOUN
futech-534	239	16	variance	variance	NOUN
futech-534	239	17	(	(	PUNCT
futech-534	239	18	table	table	NOUN
futech-534	239	19	2	2	NUM
futech-534	239	20	)	)	PUNCT
futech-534	239	21	.	.	PUNCT
futech-534	240	1	ka	ka	PROPN
futech-534	240	2	.	.	PROPN
futech-534	240	3	kumar	kumar	PROPN
futech-534	240	4	&	&	CCONJ
futech-534	240	5	k.	k.	PROPN
futech-534	240	6	hemachandran	hemachandran	PROPN
futech-534	240	7	/	/	SYM
futech-534	240	8	future	future	ADJ
futech-534	240	9	technology	technology	NOUN
futech-534	240	10	february	february	PROPN
futech-534	240	11	2026|	2026|	NUM
futech-534	240	12	volume	volume	NOUN
futech-534	240	13	05	05	NUM
futech-534	241	1	|	|	ADV
futech-534	241	2	issue	issue	NOUN
futech-534	241	3	01	01	NUM
futech-534	242	1	|	|	ADV
futech-534	242	2	pages	page	VERB
futech-534	242	3	55	55	NUM
futech-534	242	4	-	-	SYM
futech-534	242	5	64	64	NUM
futech-534	242	6	61	61	NUM
futech-534	242	7	figure	figure	NOUN
futech-534	242	8	5	5	NUM
futech-534	242	9	.	.	PUNCT
futech-534	242	10	bar	bar	NOUN
futech-534	242	11	graph	graph	NOUN
futech-534	242	12	for	for	ADP
futech-534	242	13	r	r	NOUN
futech-534	242	14	-	-	PUNCT
futech-534	242	15	squared	square	VERB
futech-534	242	16	vs	vs	ADP
futech-534	242	17	explained	explain	VERB
futech-534	242	18	variance	variance	NOUN
futech-534	242	19	figure	figure	NOUN
futech-534	242	20	6	6	NUM
futech-534	242	21	.	.	PUNCT
futech-534	242	22	bar	bar	NOUN
futech-534	242	23	graph	graph	NOUN
futech-534	242	24	for	for	ADP
futech-534	242	25	mean	mean	ADJ
futech-534	242	26	absolute	absolute	ADJ
futech-534	242	27	error	error	NOUN
futech-534	242	28	table	table	NOUN
futech-534	242	29	2	2	NUM
futech-534	242	30	.	.	PUNCT
futech-534	242	31	paired	pair	VERB
futech-534	242	32	t	t	PROPN
futech-534	242	33	-	-	PUNCT
futech-534	242	34	test	test	NOUN
futech-534	242	35	results	result	NOUN
futech-534	242	36	comparing	compare	VERB
futech-534	242	37	htl	htl	PROPN
futech-534	242	38	-	-	PUNCT
futech-534	242	39	hpo	hpo	PROPN
futech-534	242	40	with	with	ADP
futech-534	242	41	baselines	baseline	NOUN
futech-534	242	42	4.8	4.8	NUM
futech-534	242	43	ablation	ablation	NOUN
futech-534	242	44	study	study	NOUN
futech-534	242	45	and	and	CCONJ
futech-534	242	46	component	component	NOUN
futech-534	242	47	contribution	contribution	NOUN
futech-534	242	48	to	to	PART
futech-534	242	49	quantify	quantify	VERB
futech-534	242	50	the	the	DET
futech-534	242	51	contribution	contribution	NOUN
futech-534	242	52	of	of	ADP
futech-534	242	53	each	each	DET
futech-534	242	54	component	component	NOUN
futech-534	242	55	,	,	PUNCT
futech-534	242	56	an	an	DET
futech-534	242	57	ablation	ablation	NOUN
futech-534	242	58	study	study	NOUN
futech-534	242	59	was	be	AUX
futech-534	242	60	performed	perform	VERB
futech-534	242	61	.	.	PUNCT
futech-534	243	1	the	the	DET
futech-534	243	2	base	base	PROPN
futech-534	243	3	lstm	lstm	PROPN
futech-534	243	4	model	model	NOUN
futech-534	243	5	was	be	AUX
futech-534	243	6	incrementally	incrementally	ADV
futech-534	243	7	enhanced	enhance	VERB
futech-534	243	8	with	with	ADP
futech-534	243	9	transfer	transfer	NOUN
futech-534	243	10	learning	learning	NOUN
futech-534	243	11	and	and	CCONJ
futech-534	243	12	hyperparameter	hyperparameter	NOUN
futech-534	243	13	optimization	optimization	NOUN
futech-534	243	14	modules	module	NOUN
futech-534	243	15	.	.	PUNCT
futech-534	244	1	results	result	NOUN
futech-534	244	2	show	show	VERB
futech-534	244	3	that	that	SCONJ
futech-534	244	4	incorporating	incorporate	VERB
futech-534	244	5	hierarchical	hierarchical	ADJ
futech-534	244	6	transfer	transfer	NOUN
futech-534	244	7	learning	learning	NOUN
futech-534	244	8	alone	alone	ADV
futech-534	244	9	improved	improved	ADJ
futech-534	244	10	accuracy	accuracy	NOUN
futech-534	244	11	by	by	ADP
futech-534	244	12	25.9	25.9	NUM
futech-534	244	13	%	%	NOUN
futech-534	244	14	,	,	PUNCT
futech-534	244	15	while	while	SCONJ
futech-534	244	16	adding	add	VERB
futech-534	244	17	bayesian	bayesian	NOUN
futech-534	244	18	optimization	optimization	NOUN
futech-534	244	19	achieved	achieve	VERB
futech-534	244	20	an	an	DET
futech-534	244	21	overall	overall	ADJ
futech-534	244	22	improvement	improvement	NOUN
futech-534	244	23	of	of	ADP
futech-534	244	24	37.8	37.8	NUM
futech-534	244	25	%	%	NOUN
futech-534	244	26	.	.	PUNCT
futech-534	245	1	these	these	DET
futech-534	245	2	findings	finding	NOUN
futech-534	245	3	empirically	empirically	ADV
futech-534	245	4	justify	justify	VERB
futech-534	245	5	the	the	DET
futech-534	245	6	design	design	NOUN
futech-534	245	7	of	of	ADP
futech-534	245	8	the	the	DET
futech-534	245	9	integrated	integrate	VERB
futech-534	245	10	htl	htl	PROPN
futech-534	245	11	-	-	PUNCT
futech-534	245	12	hpo	hpo	PROPN
futech-534	245	13	pipeline	pipeline	NOUN
futech-534	245	14	(	(	PUNCT
futech-534	245	15	table	table	NOUN
futech-534	245	16	3	3	NUM
futech-534	245	17	)	)	PUNCT
futech-534	245	18	.	.	PUNCT
futech-534	246	1	table	table	NOUN
futech-534	246	2	3	3	NUM
futech-534	246	3	.	.	PUNCT
futech-534	246	4	ablation	ablation	NOUN
futech-534	246	5	study	study	NOUN
futech-534	246	6	showing	show	VERB
futech-534	246	7	the	the	DET
futech-534	246	8	incremental	incremental	ADJ
futech-534	246	9	impact	impact	NOUN
futech-534	246	10	of	of	ADP
futech-534	246	11	transfer	transfer	NOUN
futech-534	246	12	learning	learning	NOUN
futech-534	246	13	and	and	CCONJ
futech-534	246	14	optimization	optimization	NOUN
futech-534	246	15	4.9	4.9	NUM
futech-534	246	16	robustness	robustness	NOUN
futech-534	246	17	under	under	ADP
futech-534	246	18	noise	noise	NOUN
futech-534	246	19	and	and	CCONJ
futech-534	246	20	domain	domain	NOUN
futech-534	246	21	shifts	shift	NOUN
futech-534	246	22	real	real	ADJ
futech-534	246	23	-	-	PUNCT
futech-534	246	24	world	world	NOUN
futech-534	246	25	semiconductor	semiconductor	NOUN
futech-534	246	26	data	datum	NOUN
futech-534	246	27	often	often	ADV
futech-534	246	28	contain	contain	VERB
futech-534	246	29	measurement	measurement	NOUN
futech-534	246	30	noise	noise	NOUN
futech-534	246	31	and	and	CCONJ
futech-534	246	32	domain	domain	NOUN
futech-534	246	33	variability	variability	NOUN
futech-534	246	34	.	.	PUNCT
futech-534	247	1	to	to	PART
futech-534	247	2	test	test	VERB
futech-534	247	3	robustness	robustness	NOUN
futech-534	247	4	,	,	PUNCT
futech-534	247	5	gaussian	gaussian	ADJ
futech-534	247	6	noise	noise	NOUN
futech-534	247	7	(	(	PUNCT
futech-534	247	8	σ	σ	NOUN
futech-534	247	9	=	=	NOUN
futech-534	247	10	0.05	0.05	NUM
futech-534	247	11	)	)	PUNCT
futech-534	247	12	was	be	AUX
futech-534	247	13	added	add	VERB
futech-534	247	14	to	to	ADP
futech-534	247	15	the	the	DET
futech-534	247	16	test	test	NOUN
futech-534	247	17	data	datum	NOUN
futech-534	247	18	,	,	PUNCT
futech-534	247	19	and	and	CCONJ
futech-534	247	20	domain	domain	NOUN
futech-534	247	21	-	-	PUNCT
futech-534	247	22	shift	shift	NOUN
futech-534	247	23	scenarios	scenario	NOUN
futech-534	247	24	were	be	AUX
futech-534	247	25	simulated	simulate	VERB
futech-534	247	26	by	by	ADP
futech-534	247	27	holding	hold	VERB
futech-534	247	28	out	out	ADP
futech-534	247	29	one	one	NUM
futech-534	247	30	fab	fab	NOUN
futech-534	247	31	as	as	ADP
futech-534	247	32	an	an	DET
futech-534	247	33	unseen	unseen	ADJ
futech-534	247	34	target	target	NOUN
futech-534	247	35	.	.	PUNCT
futech-534	248	1	under	under	ADP
futech-534	248	2	noisy	noisy	ADJ
futech-534	248	3	conditions	condition	NOUN
futech-534	248	4	,	,	PUNCT
futech-534	248	5	the	the	DET
futech-534	248	6	htl	htl	PROPN
futech-534	248	7	-	-	PUNCT
futech-534	248	8	hpo	hpo	PROPN
futech-534	248	9	model	model	NOUN
futech-534	248	10	’s	’s	PART
futech-534	248	11	rmse	rmse	NOUN
futech-534	248	12	increased	increase	VERB
futech-534	248	13	marginally	marginally	ADV
futech-534	248	14	from	from	ADP
futech-534	248	15	0.079	0.079	NUM
futech-534	248	16	to	to	ADP
futech-534	248	17	0.081	0.081	NUM
futech-534	248	18	(	(	PUNCT
futech-534	248	19	≈2.5	≈2.5	NOUN
futech-534	248	20	%	%	NOUN
futech-534	248	21	)	)	PUNCT
futech-534	248	22	,	,	PUNCT
futech-534	248	23	while	while	SCONJ
futech-534	248	24	the	the	DET
futech-534	248	25	lstm	lstm	PROPN
futech-534	248	26	and	and	CCONJ
futech-534	248	27	gru	gru	NOUN
futech-534	248	28	models	model	NOUN
futech-534	248	29	degraded	degrade	VERB
futech-534	248	30	by	by	ADP
futech-534	248	31	8.2	8.2	NUM
futech-534	248	32	%	%	NOUN
futech-534	248	33	and	and	CCONJ
futech-534	248	34	11.4	11.4	NUM
futech-534	248	35	%	%	NOUN
futech-534	248	36	,	,	PUNCT
futech-534	248	37	respectively	respectively	ADV
futech-534	248	38	.	.	PUNCT
futech-534	249	1	this	this	PRON
futech-534	249	2	demonstrates	demonstrate	VERB
futech-534	249	3	the	the	DET
futech-534	249	4	resilience	resilience	NOUN
futech-534	249	5	of	of	ADP
futech-534	249	6	the	the	DET
futech-534	249	7	hierarchical	hierarchical	ADJ
futech-534	249	8	feature	feature	NOUN
futech-534	249	9	representations	representation	NOUN
futech-534	249	10	learned	learn	VERB
futech-534	249	11	via	via	ADP
futech-534	249	12	transfer	transfer	NOUN
futech-534	249	13	learning	learning	NOUN
futech-534	249	14	.	.	PUNCT
futech-534	250	1	in	in	ADP
futech-534	250	2	domain	domain	NOUN
futech-534	250	3	-	-	PUNCT
futech-534	250	4	shift	shift	NOUN
futech-534	250	5	experiments	experiment	NOUN
futech-534	250	6	,	,	PUNCT
futech-534	250	7	the	the	DET
futech-534	250	8	htlhpo	htlhpo	NOUN
futech-534	250	9	model	model	NOUN
futech-534	250	10	achieved	achieve	VERB
futech-534	250	11	a	a	DET
futech-534	250	12	cross	cross	ADJ
futech-534	250	13	-	-	ADJ
futech-534	250	14	fab	fab	ADJ
futech-534	250	15	r²	r²	NOUN
futech-534	250	16	of	of	ADP
futech-534	250	17	0.908	0.908	NUM
futech-534	250	18	,	,	PUNCT
futech-534	250	19	compared	compare	VERB
futech-534	250	20	to	to	ADP
futech-534	250	21	lstm	lstm	NOUN
futech-534	250	22	(	(	PUNCT
futech-534	250	23	0.784	0.784	NUM
futech-534	250	24	)	)	PUNCT
futech-534	250	25	and	and	CCONJ
futech-534	250	26	gru	gru	PROPN
futech-534	250	27	(	(	PUNCT
futech-534	250	28	0.623	0.623	NUM
futech-534	250	29	)	)	PUNCT
futech-534	250	30	.	.	PUNCT
futech-534	251	1	the	the	DET
futech-534	251	2	findings	finding	NOUN
futech-534	251	3	confirm	confirm	VERB
futech-534	251	4	that	that	SCONJ
futech-534	251	5	pretraining	pretraine	VERB
futech-534	251	6	on	on	ADP
futech-534	251	7	multi	multi	ADJ
futech-534	251	8	-	-	ADJ
futech-534	251	9	fab	fab	ADJ
futech-534	251	10	data	datum	NOUN
futech-534	251	11	and	and	CCONJ
futech-534	251	12	fine	fine	ADV
futech-534	251	13	-	-	PUNCT
futech-534	251	14	tuning	tuning	NOUN
futech-534	251	15	on	on	ADP
futech-534	251	16	target	target	NOUN
futech-534	251	17	domains	domain	NOUN
futech-534	251	18	significantly	significantly	ADV
futech-534	251	19	improves	improve	VERB
futech-534	251	20	generalization	generalization	NOUN
futech-534	251	21	.	.	PUNCT
futech-534	252	1	4.10	4.10	NUM
futech-534	252	2	computational	computational	ADJ
futech-534	252	3	efficiency	efficiency	NOUN
futech-534	252	4	and	and	CCONJ
futech-534	252	5	scalability	scalability	NOUN
futech-534	252	6	the	the	DET
futech-534	252	7	proposed	propose	VERB
futech-534	252	8	htl	htl	PROPN
futech-534	252	9	-	-	PUNCT
futech-534	252	10	hpo	hpo	PROPN
futech-534	252	11	model	model	NOUN
futech-534	252	12	not	not	PART
futech-534	252	13	only	only	ADV
futech-534	252	14	improves	improve	VERB
futech-534	252	15	accuracy	accuracy	NOUN
futech-534	252	16	but	but	CCONJ
futech-534	252	17	also	also	ADV
futech-534	252	18	enhances	enhance	VERB
futech-534	252	19	computational	computational	ADJ
futech-534	252	20	efficiency	efficiency	NOUN
futech-534	252	21	.	.	PUNCT
futech-534	253	1	training	training	NOUN
futech-534	253	2	convergence	convergence	NOUN
futech-534	253	3	was	be	AUX
futech-534	253	4	achieved	achieve	VERB
futech-534	253	5	in	in	ADP
futech-534	253	6	64	64	NUM
futech-534	253	7	%	%	NOUN
futech-534	253	8	fewer	few	ADJ
futech-534	253	9	epochs	epoch	NOUN
futech-534	253	10	than	than	ADP
futech-534	253	11	gru	gru	NOUN
futech-534	253	12	and	and	CCONJ
futech-534	253	13	42	42	NUM
futech-534	253	14	%	%	NOUN
futech-534	253	15	fewer	few	ADJ
futech-534	253	16	epochs	epoch	NOUN
futech-534	253	17	than	than	ADP
futech-534	253	18	lstm	lstm	ADJ
futech-534	253	19	.	.	PUNCT
futech-534	254	1	the	the	DET
futech-534	254	2	bayesian	bayesian	NOUN
futech-534	254	3	optimization	optimization	NOUN
futech-534	254	4	pipeline	pipeline	NOUN
futech-534	254	5	reduced	reduce	VERB
futech-534	254	6	manual	manual	ADJ
futech-534	254	7	hyperparameter	hyperparameter	NOUN
futech-534	254	8	tuning	tune	VERB
futech-534	254	9	time	time	NOUN
futech-534	254	10	by	by	ADP
futech-534	254	11	approximately	approximately	ADV
futech-534	254	12	58	58	NUM
futech-534	254	13	%	%	NOUN
futech-534	254	14	compared	compare	VERB
futech-534	254	15	to	to	ADP
futech-534	254	16	grid	grid	NOUN
futech-534	254	17	search	search	NOUN
futech-534	254	18	methods	method	NOUN
futech-534	254	19	.	.	PUNCT
futech-534	255	1	furthermore	furthermore	ADV
futech-534	255	2	,	,	PUNCT
futech-534	255	3	the	the	DET
futech-534	255	4	model	model	NOUN
futech-534	255	5	demonstrated	demonstrate	VERB
futech-534	255	6	excellent	excellent	ADJ
futech-534	255	7	scalability	scalability	NOUN
futech-534	255	8	,	,	PUNCT
futech-534	255	9	maintaining	maintain	VERB
futech-534	255	10	stable	stable	ADJ
futech-534	255	11	training	training	NOUN
futech-534	255	12	times	time	NOUN
futech-534	255	13	across	across	ADP
futech-534	255	14	different	different	ADJ
futech-534	255	15	dataset	dataset	NOUN
futech-534	255	16	sizes	size	NOUN
futech-534	255	17	.	.	PUNCT
futech-534	256	1	the	the	DET
futech-534	256	2	efficient	efficient	ADJ
futech-534	256	3	reuse	reuse	NOUN
futech-534	256	4	of	of	ADP
futech-534	256	5	pretrained	pretraine	VERB
futech-534	256	6	weights	weight	NOUN
futech-534	256	7	minimized	minimized	ADJ
futech-534	256	8	computational	computational	ADJ
futech-534	256	9	overhead	overhead	NOUN
futech-534	256	10	,	,	PUNCT
futech-534	256	11	making	make	VERB
futech-534	256	12	the	the	DET
futech-534	256	13	model	model	NOUN
futech-534	256	14	suitable	suitable	ADJ
futech-534	256	15	for	for	ADP
futech-534	256	16	real	real	ADJ
futech-534	256	17	-	-	PUNCT
futech-534	256	18	time	time	NOUN
futech-534	256	19	deployment	deployment	NOUN
futech-534	256	20	in	in	ADP
futech-534	256	21	smart	smart	ADJ
futech-534	256	22	manufacturing	manufacturing	NOUN
futech-534	256	23	environments	environment	NOUN
futech-534	256	24	.	.	PUNCT
futech-534	257	1	comparison	comparison	NOUN
futech-534	257	2	mean	mean	VERB
futech-534	257	3	δrmse	δrmse	ADJ
futech-534	257	4	tstatistic	tstatistic	ADJ
futech-534	257	5	pvalue	pvalue	NOUN
futech-534	257	6	significance	significance	NOUN
futech-534	257	7	(	(	PUNCT
futech-534	257	8	α	α	NOUN
futech-534	257	9	=	=	NOUN
futech-534	257	10	0.05	0.05	NUM
futech-534	257	11	)	)	PUNCT
futech-534	257	12	gru	gru	NOUN
futech-534	257	13	vs	vs	ADP
futech-534	257	14	htlhpo	htlhpo	NOUN
futech-534	257	15	0.129	0.129	NUM
futech-534	257	16	9.64	9.64	NUM
futech-534	257	17	0.0003	0.0003	NUM
futech-534	257	18	✓	✓	ADJ
futech-534	257	19	lstm	lstm	NOUN
futech-534	257	20	vs	vs	ADP
futech-534	257	21	htl	htl	PROPN
futech-534	257	22	-	-	PUNCT
futech-534	257	23	hpo	hpo	PROPN
futech-534	257	24	0.048	0.048	NUM
futech-534	257	25	5.71	5.71	NUM
futech-534	257	26	0.0021	0.0021	NUM
futech-534	257	27	✓	✓	ADJ
futech-534	257	28	decision	decision	NOUN
futech-534	257	29	tree	tree	NOUN
futech-534	257	30	vs	vs	ADP
futech-534	257	31	htlhpo	htlhpo	NOUN
futech-534	257	32	0.008	0.008	NUM
futech-534	257	33	4.36	4.36	NUM
futech-534	257	34	0.0048	0.0048	NUM
futech-534	257	35	✓	✓	ADJ
futech-534	257	36	model	model	NOUN
futech-534	257	37	variant	variant	NOUN
futech-534	257	38	rmse	rmse	NOUN
futech-534	257	39	mae	mae	PROPN
futech-534	257	40	improvement	improvement	NOUN
futech-534	257	41	(	(	PUNCT
futech-534	257	42	%	%	INTJ
futech-534	257	43	)	)	PUNCT
futech-534	257	44	base	base	NOUN
futech-534	257	45	lstm	lstm	NOUN
futech-534	257	46	0.127	0.127	NUM
futech-534	257	47	0.087	0.087	NUM
futech-534	257	48	—	—	PUNCT
futech-534	257	49	+	+	NUM
futech-534	257	50	transfer	transfer	NOUN
futech-534	257	51	learning	learning	NOUN
futech-534	257	52	(	(	PUNCT
futech-534	257	53	htl	htl	PROPN
futech-534	257	54	)	)	PUNCT
futech-534	257	55	0.094	0.094	NUM
futech-534	257	56	0.071	0.071	NUM
futech-534	257	57	+25.9	+25.9	PROPN
futech-534	257	58	+	+	CCONJ
futech-534	257	59	htl	htl	PROPN
futech-534	257	60	+	+	CCONJ
futech-534	257	61	bayesian	bayesian	NOUN
futech-534	257	62	optimization	optimization	NOUN
futech-534	257	63	(	(	PUNCT
futech-534	257	64	htl	htl	PROPN
futech-534	257	65	-	-	PUNCT
futech-534	257	66	hpo	hpo	PROPN
futech-534	257	67	)	)	PUNCT
futech-534	257	68	0.079	0.079	NUM
futech-534	257	69	0.058	0.058	NUM
futech-534	257	70	+37.8	+37.8	NOUN
futech-534	257	71	ka	ka	PROPN
futech-534	257	72	.	.	PROPN
futech-534	257	73	kumar	kumar	PROPN
futech-534	257	74	&	&	CCONJ
futech-534	257	75	k.	k.	PROPN
futech-534	257	76	hemachandran	hemachandran	PROPN
futech-534	257	77	/	/	SYM
futech-534	257	78	future	future	ADJ
futech-534	257	79	technology	technology	NOUN
futech-534	257	80	february	february	PROPN
futech-534	257	81	2026|	2026|	NUM
futech-534	257	82	volume	volume	NOUN
futech-534	257	83	05	05	NUM
futech-534	258	1	|	|	ADV
futech-534	258	2	issue	issue	NOUN
futech-534	258	3	01	01	NUM
futech-534	259	1	|	|	ADV
futech-534	259	2	pages	page	VERB
futech-534	259	3	55	55	NUM
futech-534	259	4	-	-	SYM
futech-534	259	5	64	64	NUM
futech-534	259	6	62	62	NUM
futech-534	259	7	5	5	NUM
futech-534	259	8	.	.	PUNCT
futech-534	260	1	discussion	discussion	NOUN
futech-534	260	2	the	the	DET
futech-534	260	3	experimental	experimental	ADJ
futech-534	260	4	findings	finding	NOUN
futech-534	260	5	confirm	confirm	VERB
futech-534	260	6	that	that	SCONJ
futech-534	260	7	the	the	DET
futech-534	260	8	proposed	propose	VERB
futech-534	260	9	hierarchical	hierarchical	ADJ
futech-534	260	10	transfer	transfer	NOUN
futech-534	260	11	learning	learn	VERB
futech-534	260	12	with	with	ADP
futech-534	260	13	hyperparameter	hyperparameter	NOUN
futech-534	260	14	optimization	optimization	NOUN
futech-534	260	15	(	(	PUNCT
futech-534	260	16	htl	htl	PROPN
futech-534	260	17	-	-	PUNCT
futech-534	260	18	hpo	hpo	PROPN
futech-534	260	19	)	)	PUNCT
futech-534	260	20	model	model	NOUN
futech-534	260	21	significantly	significantly	ADV
futech-534	260	22	outperforms	outperform	VERB
futech-534	260	23	conventional	conventional	ADJ
futech-534	260	24	baselines	baseline	NOUN
futech-534	260	25	in	in	ADP
futech-534	260	26	forecasting	forecasting	NOUN
futech-534	260	27	semiconductor	semiconductor	NOUN
futech-534	260	28	waferfabrication	waferfabrication	NOUN
futech-534	260	29	cycle	cycle	NOUN
futech-534	260	30	time	time	NOUN
futech-534	260	31	.	.	PUNCT
futech-534	261	1	the	the	DET
futech-534	261	2	lowest	low	ADJ
futech-534	261	3	error	error	NOUN
futech-534	261	4	rates	rate	NOUN
futech-534	261	5	(	(	PUNCT
futech-534	261	6	mse	mse	NOUN
futech-534	261	7	=	=	SYM
futech-534	261	8	0.006	0.006	NUM
futech-534	261	9	,	,	PUNCT
futech-534	261	10	rmse	rmse	NOUN
futech-534	261	11	=	=	PROPN
futech-534	261	12	0.079	0.079	NUM
futech-534	261	13	)	)	PUNCT
futech-534	261	14	and	and	CCONJ
futech-534	261	15	highest	high	ADJ
futech-534	261	16	goodness	goodness	NOUN
futech-534	261	17	-	-	PUNCT
futech-534	261	18	of	of	ADP
futech-534	261	19	-	-	PUNCT
futech-534	261	20	fit	fit	ADJ
futech-534	261	21	(	(	PUNCT
futech-534	261	22	r²	r²	NOUN
futech-534	261	23	=	=	NOUN
futech-534	261	24	0.934	0.934	NUM
futech-534	261	25	,	,	PUNCT
futech-534	261	26	ev	ev	X
futech-534	261	27	=	=	PUNCT
futech-534	261	28	0.938	0.938	NUM
futech-534	261	29	)	)	PUNCT
futech-534	261	30	demonstrate	demonstrate	VERB
futech-534	261	31	its	its	PRON
futech-534	261	32	ability	ability	NOUN
futech-534	261	33	to	to	PART
futech-534	261	34	capture	capture	VERB
futech-534	261	35	complex	complex	ADJ
futech-534	261	36	nonlinear	nonlinear	ADJ
futech-534	261	37	dependencies	dependency	NOUN
futech-534	261	38	across	across	ADP
futech-534	261	39	multivariate	multivariate	NOUN
futech-534	261	40	process	process	NOUN
futech-534	261	41	variables	variable	NOUN
futech-534	261	42	.	.	PUNCT
futech-534	262	1	the	the	DET
futech-534	262	2	residual	residual	ADJ
futech-534	262	3	analysis	analysis	NOUN
futech-534	262	4	indicates	indicate	VERB
futech-534	262	5	reduced	reduced	ADJ
futech-534	262	6	bias	bias	NOUN
futech-534	262	7	and	and	CCONJ
futech-534	262	8	variance	variance	NOUN
futech-534	262	9	,	,	PUNCT
futech-534	262	10	while	while	SCONJ
futech-534	262	11	paired	pair	VERB
futech-534	262	12	t	t	NOUN
futech-534	262	13	-	-	PUNCT
futech-534	262	14	tests	test	NOUN
futech-534	262	15	(	(	PUNCT
futech-534	262	16	p	p	X
futech-534	262	17	<	<	X
futech-534	262	18	0.05	0.05	NUM
futech-534	262	19	)	)	PUNCT
futech-534	262	20	confirm	confirm	VERB
futech-534	262	21	that	that	SCONJ
futech-534	262	22	these	these	DET
futech-534	262	23	improvements	improvement	NOUN
futech-534	262	24	are	be	AUX
futech-534	262	25	statistically	statistically	ADV
futech-534	262	26	significant	significant	ADJ
futech-534	262	27	.	.	PUNCT
futech-534	263	1	the	the	DET
futech-534	263	2	ablation	ablation	NOUN
futech-534	263	3	study	study	NOUN
futech-534	263	4	further	far	ADV
futech-534	263	5	validates	validate	VERB
futech-534	263	6	the	the	DET
futech-534	263	7	synergistic	synergistic	ADJ
futech-534	263	8	benefit	benefit	NOUN
futech-534	263	9	of	of	ADP
futech-534	263	10	hierarchical	hierarchical	ADJ
futech-534	263	11	transfer	transfer	NOUN
futech-534	263	12	learning	learning	NOUN
futech-534	263	13	and	and	CCONJ
futech-534	263	14	bayesian	bayesian	NOUN
futech-534	263	15	tpe	tpe	NOUN
futech-534	263	16	optimization	optimization	NOUN
futech-534	263	17	:	:	PUNCT
futech-534	263	18	the	the	DET
futech-534	263	19	former	former	ADJ
futech-534	263	20	enables	enable	VERB
futech-534	263	21	effective	effective	ADJ
futech-534	263	22	knowledge	knowledge	NOUN
futech-534	263	23	reuse	reuse	NOUN
futech-534	263	24	across	across	ADP
futech-534	263	25	fabs	fab	NOUN
futech-534	263	26	,	,	PUNCT
futech-534	263	27	while	while	SCONJ
futech-534	263	28	the	the	DET
futech-534	263	29	latter	latter	ADJ
futech-534	263	30	identifies	identify	VERB
futech-534	263	31	stable	stable	ADJ
futech-534	263	32	hyperparameter	hyperparameter	NOUN
futech-534	263	33	configurations	configuration	NOUN
futech-534	263	34	that	that	PRON
futech-534	263	35	accelerate	accelerate	VERB
futech-534	263	36	convergence	convergence	NOUN
futech-534	263	37	and	and	CCONJ
futech-534	263	38	prevent	prevent	VERB
futech-534	263	39	overfitting	overfitting	NOUN
futech-534	263	40	.	.	PUNCT
futech-534	264	1	the	the	DET
futech-534	264	2	model	model	NOUN
futech-534	264	3	’s	’s	PART
futech-534	264	4	resilience	resilience	NOUN
futech-534	264	5	under	under	ADP
futech-534	264	6	noise	noise	NOUN
futech-534	264	7	and	and	CCONJ
futech-534	264	8	domain	domain	NOUN
futech-534	264	9	shift	shift	NOUN
futech-534	264	10	also	also	ADV
futech-534	264	11	evidences	evidence	VERB
futech-534	264	12	its	its	PRON
futech-534	264	13	adaptability	adaptability	NOUN
futech-534	264	14	to	to	ADP
futech-534	264	15	heterogeneous	heterogeneous	ADJ
futech-534	264	16	industrial	industrial	ADJ
futech-534	264	17	conditions	condition	NOUN
futech-534	264	18	,	,	PUNCT
futech-534	264	19	confirming	confirm	VERB
futech-534	264	20	its	its	PRON
futech-534	264	21	robustness	robustness	NOUN
futech-534	264	22	and	and	CCONJ
futech-534	264	23	scalability	scalability	NOUN
futech-534	264	24	.	.	PUNCT
futech-534	265	1	these	these	DET
futech-534	265	2	findings	finding	NOUN
futech-534	265	3	align	align	VERB
futech-534	265	4	with	with	ADP
futech-534	265	5	and	and	CCONJ
futech-534	265	6	extend	extend	VERB
futech-534	265	7	previous	previous	ADJ
futech-534	265	8	research	research	NOUN
futech-534	265	9	in	in	ADP
futech-534	265	10	semiconductor	semiconductor	NOUN
futech-534	265	11	process	process	NOUN
futech-534	265	12	modeling	modeling	NOUN
futech-534	265	13	.	.	PUNCT
futech-534	266	1	earlier	early	ADJ
futech-534	266	2	reviews	review	NOUN
futech-534	266	3	by	by	ADP
futech-534	266	4	espadinha	espadinha	NOUN
futech-534	266	5	-	-	NOUN
futech-534	266	6	cruz	cruz	PROPN
futech-534	266	7	et	et	PROPN
futech-534	266	8	al	al	PROPN
futech-534	266	9	.	.	PUNCT
futech-534	267	1	[	[	X
futech-534	267	2	13	13	NUM
futech-534	267	3	]	]	PUNCT
futech-534	267	4	and	and	CCONJ
futech-534	267	5	huang	huang	PROPN
futech-534	267	6	et	et	PROPN
futech-534	267	7	al	al	PROPN
futech-534	267	8	.	.	PUNCT
futech-534	268	1	[	[	X
futech-534	268	2	7	7	X
futech-534	268	3	]	]	PUNCT
futech-534	268	4	emphasized	emphasize	VERB
futech-534	268	5	the	the	DET
futech-534	268	6	growing	grow	VERB
futech-534	268	7	role	role	NOUN
futech-534	268	8	of	of	ADP
futech-534	268	9	data	data	NOUN
futech-534	268	10	-	-	PUNCT
futech-534	268	11	driven	drive	VERB
futech-534	268	12	approaches	approach	NOUN
futech-534	268	13	for	for	ADP
futech-534	268	14	improving	improve	VERB
futech-534	268	15	process	process	NOUN
futech-534	268	16	visibility	visibility	NOUN
futech-534	268	17	and	and	CCONJ
futech-534	268	18	predictive	predictive	ADJ
futech-534	268	19	control	control	NOUN
futech-534	268	20	.	.	PUNCT
futech-534	269	1	however	however	ADV
futech-534	269	2	,	,	PUNCT
futech-534	269	3	their	their	PRON
futech-534	269	4	analyses	analysis	NOUN
futech-534	269	5	also	also	ADV
futech-534	269	6	noted	note	VERB
futech-534	269	7	that	that	SCONJ
futech-534	269	8	conventional	conventional	ADJ
futech-534	269	9	data	datum	NOUN
futech-534	269	10	mining	mining	NOUN
futech-534	269	11	and	and	CCONJ
futech-534	269	12	neural	neural	ADJ
futech-534	269	13	models	model	NOUN
futech-534	269	14	struggle	struggle	VERB
futech-534	269	15	to	to	PART
futech-534	269	16	generalize	generalize	VERB
futech-534	269	17	under	under	ADP
futech-534	269	18	domain	domain	NOUN
futech-534	269	19	variability	variability	NOUN
futech-534	269	20	.	.	PUNCT
futech-534	270	1	the	the	DET
futech-534	270	2	hierarchical	hierarchical	ADJ
futech-534	270	3	adaptation	adaptation	NOUN
futech-534	270	4	used	use	VERB
futech-534	270	5	in	in	ADP
futech-534	270	6	this	this	DET
futech-534	270	7	study	study	NOUN
futech-534	270	8	directly	directly	ADV
futech-534	270	9	addresses	address	VERB
futech-534	270	10	that	that	SCONJ
futech-534	270	11	gap	gap	NOUN
futech-534	270	12	by	by	ADP
futech-534	270	13	transferring	transfer	VERB
futech-534	270	14	knowledge	knowledge	NOUN
futech-534	270	15	between	between	ADP
futech-534	270	16	heterogeneous	heterogeneous	ADJ
futech-534	270	17	production	production	NOUN
futech-534	270	18	lines	line	NOUN
futech-534	270	19	,	,	PUNCT
futech-534	270	20	consistent	consistent	ADJ
futech-534	270	21	with	with	ADP
futech-534	270	22	the	the	DET
futech-534	270	23	cross	cross	NOUN
futech-534	270	24	-	-	NOUN
futech-534	270	25	process	process	NOUN
futech-534	270	26	modeling	modeling	NOUN
futech-534	270	27	direction	direction	NOUN
futech-534	270	28	suggested	suggest	VERB
futech-534	270	29	by	by	ADP
futech-534	270	30	doinychko	doinychko	ADJ
futech-534	270	31	[	[	X
futech-534	270	32	17	17	NUM
futech-534	270	33	]	]	PUNCT
futech-534	270	34	and	and	CCONJ
futech-534	270	35	yang	yang	PROPN
futech-534	270	36	et	et	PROPN
futech-534	270	37	al	al	PROPN
futech-534	270	38	.	.	PUNCT
futech-534	271	1	[	[	X
futech-534	271	2	21	21	NUM
futech-534	271	3	]	]	PUNCT
futech-534	271	4	.	.	PUNCT
futech-534	272	1	similarly	similarly	ADV
futech-534	272	2	,	,	PUNCT
futech-534	272	3	prior	prior	ADV
futech-534	272	4	works	work	NOUN
futech-534	272	5	on	on	ADP
futech-534	272	6	virtual	virtual	ADJ
futech-534	272	7	metrology	metrology	NOUN
futech-534	272	8	and	and	CCONJ
futech-534	272	9	intelligent	intelligent	ADJ
futech-534	272	10	fault	fault	NOUN
futech-534	272	11	detection	detection	NOUN
futech-534	272	12	—	—	PUNCT
futech-534	272	13	such	such	ADJ
futech-534	272	14	as	as	ADP
futech-534	272	15	chien	chien	PROPN
futech-534	272	16	et	et	PROPN
futech-534	272	17	al	al	PROPN
futech-534	272	18	.	.	PUNCT
futech-534	273	1	[	[	X
futech-534	273	2	19	19	NUM
futech-534	273	3	]	]	PUNCT
futech-534	273	4	and	and	CCONJ
futech-534	273	5	maitra	maitra	PROPN
futech-534	273	6	et	et	PROPN
futech-534	273	7	al	al	PROPN
futech-534	273	8	.	.	PUNCT
futech-534	274	1	[	[	X
futech-534	274	2	20]—demonstrated	20]—demonstrate	VERB
futech-534	274	3	that	that	DET
futech-534	274	4	transfer	transfer	NOUN
futech-534	274	5	learning	learning	NOUN
futech-534	274	6	can	can	AUX
futech-534	274	7	enhance	enhance	VERB
futech-534	274	8	diagnostic	diagnostic	ADJ
futech-534	274	9	accuracy	accuracy	NOUN
futech-534	274	10	.	.	PUNCT
futech-534	275	1	the	the	DET
futech-534	275	2	present	present	ADJ
futech-534	275	3	results	result	NOUN
futech-534	275	4	extend	extend	VERB
futech-534	275	5	those	those	DET
futech-534	275	6	insights	insight	NOUN
futech-534	275	7	from	from	ADP
futech-534	275	8	equipment	equipment	NOUN
futech-534	275	9	-	-	PUNCT
futech-534	275	10	level	level	NOUN
futech-534	275	11	prediction	prediction	NOUN
futech-534	275	12	to	to	PART
futech-534	275	13	complete	complete	VERB
futech-534	275	14	cycle	cycle	NOUN
futech-534	275	15	-	-	PUNCT
futech-534	275	16	time	time	NOUN
futech-534	275	17	forecasting	forecasting	NOUN
futech-534	275	18	,	,	PUNCT
futech-534	275	19	a	a	DET
futech-534	275	20	broader	broad	ADJ
futech-534	275	21	and	and	CCONJ
futech-534	275	22	more	more	ADV
futech-534	275	23	dynamic	dynamic	ADJ
futech-534	275	24	manufacturing	manufacturing	NOUN
futech-534	275	25	variable	variable	NOUN
futech-534	275	26	.	.	PUNCT
futech-534	276	1	from	from	ADP
futech-534	276	2	an	an	DET
futech-534	276	3	optimization	optimization	NOUN
futech-534	276	4	perspective	perspective	NOUN
futech-534	276	5	,	,	PUNCT
futech-534	276	6	alizadeh	alizadeh	NOUN
futech-534	276	7	and	and	CCONJ
futech-534	276	8	ma	ma	PROPN
futech-534	277	1	[	[	X
futech-534	277	2	24	24	NUM
futech-534	277	3	]	]	PUNCT
futech-534	277	4	and	and	CCONJ
futech-534	277	5	wang	wang	PROPN
futech-534	277	6	et	et	PROPN
futech-534	277	7	al	al	PROPN
futech-534	277	8	.	.	PUNCT
futech-534	278	1	[	[	X
futech-534	278	2	23	23	NUM
futech-534	278	3	]	]	PUNCT
futech-534	278	4	highlighted	highlight	VERB
futech-534	278	5	that	that	SCONJ
futech-534	278	6	tuning	tune	VERB
futech-534	278	7	algorithmic	algorithmic	ADJ
futech-534	278	8	parameters	parameter	NOUN
futech-534	278	9	through	through	ADP
futech-534	278	10	hybrid	hybrid	NOUN
futech-534	278	11	or	or	CCONJ
futech-534	278	12	fuzzy	fuzzy	ADJ
futech-534	278	13	approaches	approach	NOUN
futech-534	278	14	can	can	AUX
futech-534	278	15	significantly	significantly	ADV
futech-534	278	16	enhance	enhance	VERB
futech-534	278	17	predictive	predictive	ADJ
futech-534	278	18	precision	precision	NOUN
futech-534	278	19	.	.	PUNCT
futech-534	279	1	the	the	DET
futech-534	279	2	superior	superior	ADJ
futech-534	279	3	stability	stability	NOUN
futech-534	279	4	observed	observe	VERB
futech-534	279	5	in	in	ADP
futech-534	279	6	the	the	DET
futech-534	279	7	htl	htl	PROPN
futech-534	279	8	-	-	PUNCT
futech-534	279	9	hpo	hpo	PROPN
futech-534	279	10	framework	framework	NOUN
futech-534	279	11	confirms	confirm	VERB
futech-534	279	12	that	that	SCONJ
futech-534	279	13	bayesian	bayesian	NOUN
futech-534	279	14	optimization	optimization	NOUN
futech-534	279	15	outperforms	outperform	VERB
futech-534	279	16	heuristic	heuristic	ADJ
futech-534	279	17	grid	grid	NOUN
futech-534	279	18	searches	search	NOUN
futech-534	279	19	and	and	CCONJ
futech-534	279	20	metaheuristic	metaheuristic	ADJ
futech-534	279	21	hybrids	hybrid	NOUN
futech-534	279	22	by	by	ADP
futech-534	279	23	probabilistically	probabilistically	ADV
futech-534	279	24	estimating	estimate	VERB
futech-534	279	25	performance	performance	NOUN
futech-534	279	26	improvements	improvement	NOUN
futech-534	279	27	before	before	ADP
futech-534	279	28	evaluating	evaluate	VERB
futech-534	279	29	candidates	candidate	NOUN
futech-534	279	30	.	.	PUNCT
futech-534	280	1	likewise	likewise	ADV
futech-534	280	2	,	,	PUNCT
futech-534	280	3	the	the	DET
futech-534	280	4	improvement	improvement	NOUN
futech-534	280	5	over	over	ADP
futech-534	280	6	deep	deep	ADJ
futech-534	280	7	-	-	PUNCT
futech-534	280	8	learning	learn	VERB
futech-534	280	9	baselines	baseline	NOUN
futech-534	280	10	such	such	ADJ
futech-534	280	11	as	as	ADP
futech-534	280	12	lstm	lstm	NOUN
futech-534	280	13	and	and	CCONJ
futech-534	280	14	gru	gru	NOUN
futech-534	280	15	is	be	AUX
futech-534	280	16	consistent	consistent	ADJ
futech-534	280	17	with	with	ADP
futech-534	280	18	lee	lee	PROPN
futech-534	280	19	and	and	CCONJ
futech-534	280	20	gao	gao	PROPN
futech-534	281	1	[	[	X
futech-534	281	2	27	27	NUM
futech-534	281	3	]	]	PUNCT
futech-534	281	4	and	and	CCONJ
futech-534	281	5	wang	wang	PROPN
futech-534	281	6	et	et	PROPN
futech-534	281	7	al	al	PROPN
futech-534	281	8	.	.	PUNCT
futech-534	282	1	[	[	X
futech-534	282	2	28	28	NUM
futech-534	282	3	]	]	PUNCT
futech-534	282	4	,	,	PUNCT
futech-534	282	5	who	who	PRON
futech-534	282	6	found	find	VERB
futech-534	282	7	that	that	SCONJ
futech-534	282	8	combining	combine	VERB
futech-534	282	9	hierarchical	hierarchical	ADJ
futech-534	282	10	or	or	CCONJ
futech-534	282	11	hybrid	hybrid	ADJ
futech-534	282	12	architectures	architecture	NOUN
futech-534	282	13	with	with	ADP
futech-534	282	14	adaptive	adaptive	ADJ
futech-534	282	15	optimization	optimization	NOUN
futech-534	282	16	yielded	yield	VERB
futech-534	282	17	more	more	ADV
futech-534	282	18	scalable	scalable	ADJ
futech-534	282	19	forecasting	forecasting	NOUN
futech-534	282	20	performance	performance	NOUN
futech-534	282	21	.	.	PUNCT
futech-534	283	1	collectively	collectively	ADV
futech-534	283	2	,	,	PUNCT
futech-534	283	3	these	these	DET
futech-534	283	4	parallels	parallel	VERB
futech-534	283	5	show	show	VERB
futech-534	283	6	that	that	SCONJ
futech-534	283	7	the	the	DET
futech-534	283	8	current	current	ADJ
futech-534	283	9	study	study	NOUN
futech-534	283	10	’s	’s	PART
futech-534	283	11	advancements	advancement	NOUN
futech-534	283	12	are	be	AUX
futech-534	283	13	theoretically	theoretically	ADV
futech-534	283	14	consistent	consistent	ADJ
futech-534	283	15	with	with	ADP
futech-534	283	16	,	,	PUNCT
futech-534	283	17	yet	yet	ADV
futech-534	283	18	empirically	empirically	ADV
futech-534	283	19	more	more	ADV
futech-534	283	20	robust	robust	ADJ
futech-534	283	21	than	than	ADP
futech-534	283	22	,	,	PUNCT
futech-534	283	23	existing	exist	VERB
futech-534	283	24	models	model	NOUN
futech-534	283	25	in	in	ADP
futech-534	283	26	the	the	DET
futech-534	283	27	semiconductor	semiconductor	NOUN
futech-534	283	28	analytics	analytic	NOUN
futech-534	283	29	literature	literature	NOUN
futech-534	283	30	.	.	PUNCT
futech-534	284	1	the	the	DET
futech-534	284	2	practical	practical	ADJ
futech-534	284	3	implications	implication	NOUN
futech-534	284	4	for	for	ADP
futech-534	284	5	wafer	wafer	NOUN
futech-534	284	6	-	-	PUNCT
futech-534	284	7	fab	fab	NOUN
futech-534	284	8	operations	operation	NOUN
futech-534	284	9	are	be	AUX
futech-534	284	10	substantial	substantial	ADJ
futech-534	284	11	.	.	PUNCT
futech-534	285	1	enhanced	enhance	VERB
futech-534	285	2	cycle	cycle	NOUN
futech-534	285	3	-	-	PUNCT
futech-534	285	4	time	time	NOUN
futech-534	285	5	forecasts	forecast	NOUN
futech-534	285	6	enable	enable	VERB
futech-534	285	7	more	more	ADJ
futech-534	285	8	reliable	reliable	ADJ
futech-534	285	9	scheduling	scheduling	NOUN
futech-534	285	10	,	,	PUNCT
futech-534	285	11	efficient	efficient	ADJ
futech-534	285	12	tool	tool	NOUN
futech-534	285	13	loading	loading	NOUN
futech-534	285	14	,	,	PUNCT
futech-534	285	15	and	and	CCONJ
futech-534	285	16	proactive	proactive	ADJ
futech-534	285	17	wip	wip	PROPN
futech-534	285	18	control	control	PROPN
futech-534	285	19	,	,	PUNCT
futech-534	285	20	directly	directly	ADV
futech-534	285	21	improving	improve	VERB
futech-534	285	22	throughput	throughput	NOUN
futech-534	285	23	and	and	CCONJ
futech-534	285	24	on	on	ADP
futech-534	285	25	-	-	PUNCT
futech-534	285	26	time	time	NOUN
futech-534	285	27	delivery	delivery	NOUN
futech-534	285	28	.	.	PUNCT
futech-534	286	1	by	by	ADP
futech-534	286	2	allowing	allow	VERB
futech-534	286	3	pretrained	pretraine	VERB
futech-534	286	4	models	model	NOUN
futech-534	286	5	to	to	PART
futech-534	286	6	be	be	AUX
futech-534	286	7	reused	reuse	VERB
futech-534	286	8	and	and	CCONJ
futech-534	286	9	fine	fine	ADV
futech-534	286	10	-	-	PUNCT
futech-534	286	11	tuned	tune	VERB
futech-534	286	12	for	for	ADP
futech-534	286	13	new	new	ADJ
futech-534	286	14	fabs	fab	NOUN
futech-534	286	15	,	,	PUNCT
futech-534	286	16	the	the	DET
futech-534	286	17	htlhpo	htlhpo	NOUN
futech-534	286	18	approach	approach	NOUN
futech-534	286	19	supports	support	VERB
futech-534	286	20	rapid	rapid	ADJ
futech-534	286	21	deployment	deployment	NOUN
futech-534	286	22	during	during	ADP
futech-534	286	23	product	product	NOUN
futech-534	286	24	transitions	transition	NOUN
futech-534	286	25	,	,	PUNCT
futech-534	286	26	aligning	align	VERB
futech-534	286	27	with	with	ADP
futech-534	286	28	the	the	DET
futech-534	286	29	scalable	scalable	ADJ
futech-534	286	30	frameworks	framework	NOUN
futech-534	286	31	envisioned	envision	VERB
futech-534	286	32	by	by	ADP
futech-534	286	33	xu	xu	PROPN
futech-534	286	34	et	et	PROPN
futech-534	286	35	al	al	PROPN
futech-534	286	36	.	.	PUNCT
futech-534	287	1	[	[	X
futech-534	287	2	9	9	NUM
futech-534	287	3	]	]	PUNCT
futech-534	287	4	and	and	CCONJ
futech-534	287	5	rashidi	rashidi	VERB
futech-534	287	6	et	et	PROPN
futech-534	287	7	al	al	PROPN
futech-534	287	8	.	.	PUNCT
futech-534	288	1	[	[	X
futech-534	288	2	5	5	NUM
futech-534	288	3	]	]	PUNCT
futech-534	288	4	.	.	PUNCT
futech-534	289	1	furthermore	furthermore	ADV
futech-534	289	2	,	,	PUNCT
futech-534	289	3	the	the	DET
futech-534	289	4	model	model	NOUN
futech-534	289	5	’s	’s	PART
futech-534	289	6	robustness	robustness	NOUN
futech-534	289	7	against	against	ADP
futech-534	289	8	sensor	sensor	NOUN
futech-534	289	9	noise	noise	NOUN
futech-534	289	10	and	and	CCONJ
futech-534	289	11	production	production	NOUN
futech-534	289	12	variability	variability	NOUN
futech-534	289	13	offers	offer	VERB
futech-534	289	14	a	a	DET
futech-534	289	15	foundation	foundation	NOUN
futech-534	289	16	for	for	ADP
futech-534	289	17	digital	digital	ADJ
futech-534	289	18	-	-	PUNCT
futech-534	289	19	twin	twin	NOUN
futech-534	289	20	integration	integration	NOUN
futech-534	289	21	,	,	PUNCT
futech-534	289	22	in	in	ADP
futech-534	289	23	which	which	PRON
futech-534	289	24	virtual	virtual	ADJ
futech-534	289	25	representations	representation	NOUN
futech-534	289	26	of	of	ADP
futech-534	289	27	fab	fab	NOUN
futech-534	289	28	processes	process	NOUN
futech-534	289	29	can	can	AUX
futech-534	289	30	test	test	VERB
futech-534	289	31	scheduling	scheduling	NOUN
futech-534	289	32	policies	policy	NOUN
futech-534	289	33	before	before	ADP
futech-534	289	34	physical	physical	ADJ
futech-534	289	35	execution	execution	NOUN
futech-534	289	36	.	.	PUNCT
futech-534	290	1	such	such	ADJ
futech-534	290	2	adaptability	adaptability	NOUN
futech-534	290	3	also	also	ADV
futech-534	290	4	promotes	promote	VERB
futech-534	290	5	sustainability	sustainability	NOUN
futech-534	290	6	:	:	PUNCT
futech-534	290	7	reduced	reduce	VERB
futech-534	290	8	rework	rework	NOUN
futech-534	290	9	,	,	PUNCT
futech-534	290	10	minimized	minimized	ADJ
futech-534	290	11	idling	idle	VERB
futech-534	290	12	,	,	PUNCT
futech-534	290	13	and	and	CCONJ
futech-534	290	14	optimized	optimize	VERB
futech-534	290	15	equipment	equipment	NOUN
futech-534	290	16	utilization	utilization	NOUN
futech-534	290	17	correspond	correspond	VERB
futech-534	290	18	to	to	PART
futech-534	290	19	lower	lower	VERB
futech-534	290	20	energy	energy	NOUN
futech-534	290	21	consumption	consumption	NOUN
futech-534	290	22	and	and	CCONJ
futech-534	290	23	resource	resource	NOUN
futech-534	290	24	waste	waste	NOUN
futech-534	290	25	,	,	PUNCT
futech-534	290	26	echoing	echo	VERB
futech-534	290	27	the	the	DET
futech-534	290	28	sustainability	sustainability	NOUN
futech-534	290	29	imperatives	imperative	NOUN
futech-534	290	30	discussed	discuss	VERB
futech-534	290	31	by	by	ADP
futech-534	290	32	xia	xia	PROPN
futech-534	290	33	et	et	PROPN
futech-534	290	34	al	al	PROPN
futech-534	290	35	.	.	PUNCT
futech-534	291	1	[	[	X
futech-534	291	2	14	14	NUM
futech-534	291	3	]	]	PUNCT
futech-534	291	4	and	and	CCONJ
futech-534	291	5	tin	tin	NOUN
futech-534	291	6	et	et	NOUN
futech-534	291	7	al	al	PROPN
futech-534	291	8	.	.	PUNCT
futech-534	292	1	[	[	X
futech-534	292	2	26	26	NUM
futech-534	292	3	]	]	PUNCT
futech-534	292	4	.	.	PUNCT
futech-534	293	1	nevertheless	nevertheless	ADV
futech-534	293	2	,	,	PUNCT
futech-534	293	3	the	the	DET
futech-534	293	4	study	study	NOUN
futech-534	293	5	presents	present	VERB
futech-534	293	6	certain	certain	ADJ
futech-534	293	7	limitations	limitation	NOUN
futech-534	293	8	.	.	PUNCT
futech-534	294	1	although	although	SCONJ
futech-534	294	2	the	the	DET
futech-534	294	3	hierarchical	hierarchical	ADJ
futech-534	294	4	transfer	transfer	NOUN
futech-534	294	5	mechanism	mechanism	NOUN
futech-534	294	6	lowers	lower	VERB
futech-534	294	7	data	datum	NOUN
futech-534	294	8	requirements	requirement	NOUN
futech-534	294	9	,	,	PUNCT
futech-534	294	10	it	it	PRON
futech-534	294	11	still	still	ADV
futech-534	294	12	depends	depend	VERB
futech-534	294	13	on	on	ADP
futech-534	294	14	a	a	DET
futech-534	294	15	minimum	minimum	ADJ
futech-534	294	16	volume	volume	NOUN
futech-534	294	17	of	of	ADP
futech-534	294	18	targetdomain	targetdomain	ADJ
futech-534	294	19	data	datum	NOUN
futech-534	294	20	for	for	ADP
futech-534	294	21	fine	fine	ADV
futech-534	294	22	-	-	PUNCT
futech-534	294	23	tuning	tuning	NOUN
futech-534	294	24	.	.	PUNCT
futech-534	295	1	extremely	extremely	ADV
futech-534	295	2	data	data	NOUN
futech-534	295	3	-	-	PUNCT
futech-534	295	4	sparse	sparse	ADJ
futech-534	295	5	or	or	CCONJ
futech-534	295	6	rapidly	rapidly	ADV
futech-534	295	7	changing	change	VERB
futech-534	295	8	product	product	NOUN
futech-534	295	9	mixes	mix	VERB
futech-534	295	10	may	may	AUX
futech-534	295	11	limit	limit	VERB
futech-534	295	12	adaptation	adaptation	NOUN
futech-534	295	13	efficiency	efficiency	NOUN
futech-534	295	14	.	.	PUNCT
futech-534	296	1	the	the	DET
futech-534	296	2	experiments	experiment	NOUN
futech-534	296	3	rely	rely	VERB
futech-534	296	4	primarily	primarily	ADV
futech-534	296	5	on	on	ADP
futech-534	296	6	the	the	DET
futech-534	296	7	public	public	ADJ
futech-534	296	8	dataset	dataset	VERB
futech-534	296	9	by	by	ADP
futech-534	296	10	tchatchoua	tchatchoua	PROPN
futech-534	296	11	et	et	PROPN
futech-534	296	12	al	al	PROPN
futech-534	296	13	.	.	PUNCT
futech-534	297	1	[	[	X
futech-534	297	2	30	30	NUM
futech-534	297	3	]	]	PUNCT
futech-534	297	4	;	;	PUNCT
futech-534	297	5	therefore	therefore	ADV
futech-534	297	6	,	,	PUNCT
futech-534	297	7	broader	broad	ADJ
futech-534	297	8	validation	validation	NOUN
futech-534	297	9	across	across	ADP
futech-534	297	10	multiple	multiple	ADJ
futech-534	297	11	fabs	fab	NOUN
futech-534	297	12	,	,	PUNCT
futech-534	297	13	process	process	NOUN
futech-534	297	14	generations	generation	NOUN
futech-534	297	15	,	,	PUNCT
futech-534	297	16	and	and	CCONJ
futech-534	297	17	product	product	NOUN
futech-534	297	18	types	type	NOUN
futech-534	297	19	would	would	AUX
futech-534	297	20	strengthen	strengthen	VERB
futech-534	297	21	external	external	ADJ
futech-534	297	22	generalizability	generalizability	NOUN
futech-534	297	23	.	.	PUNCT
futech-534	298	1	in	in	ADP
futech-534	298	2	addition	addition	NOUN
futech-534	298	3	,	,	PUNCT
futech-534	298	4	while	while	SCONJ
futech-534	298	5	bayesian	bayesian	NOUN
futech-534	298	6	optimization	optimization	NOUN
futech-534	298	7	is	be	AUX
futech-534	298	8	more	more	ADV
futech-534	298	9	computationally	computationally	ADV
futech-534	298	10	efficient	efficient	ADJ
futech-534	298	11	than	than	ADP
futech-534	298	12	grid	grid	NOUN
futech-534	298	13	search	search	NOUN
futech-534	298	14	,	,	PUNCT
futech-534	298	15	the	the	DET
futech-534	298	16	full	full	ADJ
futech-534	298	17	htl	htl	PROPN
futech-534	298	18	-	-	PUNCT
futech-534	298	19	hpo	hpo	PROPN
futech-534	298	20	pipeline	pipeline	NOUN
futech-534	298	21	remains	remain	VERB
futech-534	298	22	resourceintensive	resourceintensive	ADJ
futech-534	298	23	relative	relative	ADJ
futech-534	298	24	to	to	ADP
futech-534	298	25	simpler	simple	ADJ
futech-534	298	26	models	model	NOUN
futech-534	298	27	such	such	ADJ
futech-534	298	28	as	as	ADP
futech-534	298	29	decision	decision	NOUN
futech-534	298	30	trees	tree	NOUN
futech-534	298	31	[	[	X
futech-534	298	32	29	29	NUM
futech-534	298	33	]	]	PUNCT
futech-534	298	34	.	.	PUNCT
futech-534	299	1	moreover	moreover	ADV
futech-534	299	2	,	,	PUNCT
futech-534	299	3	the	the	DET
futech-534	299	4	current	current	ADJ
futech-534	299	5	implementation	implementation	NOUN
futech-534	299	6	functions	function	NOUN
futech-534	299	7	offline	offline	ADJ
futech-534	299	8	and	and	CCONJ
futech-534	299	9	does	do	AUX
futech-534	299	10	not	not	PART
futech-534	299	11	incorporate	incorporate	VERB
futech-534	299	12	online	online	ADV
futech-534	299	13	or	or	CCONJ
futech-534	299	14	continual	continual	ADJ
futech-534	299	15	learning	learning	NOUN
futech-534	299	16	to	to	PART
futech-534	299	17	adapt	adapt	VERB
futech-534	299	18	automatically	automatically	ADV
futech-534	299	19	to	to	PART
futech-534	299	20	concept	concept	VERB
futech-534	299	21	drift	drift	NOUN
futech-534	299	22	over	over	ADP
futech-534	299	23	time	time	NOUN
futech-534	299	24	.	.	PUNCT
futech-534	300	1	future	future	ADJ
futech-534	300	2	research	research	NOUN
futech-534	300	3	should	should	AUX
futech-534	300	4	address	address	VERB
futech-534	300	5	these	these	DET
futech-534	300	6	gaps	gap	NOUN
futech-534	300	7	by	by	ADP
futech-534	300	8	introducing	introduce	VERB
futech-534	300	9	meta	meta	ADJ
futech-534	300	10	-	-	PUNCT
futech-534	300	11	learning	learning	NOUN
futech-534	300	12	or	or	CCONJ
futech-534	300	13	self	self	NOUN
futech-534	300	14	-	-	PUNCT
futech-534	300	15	supervised	supervise	VERB
futech-534	300	16	pretraining	pretraine	VERB
futech-534	300	17	to	to	PART
futech-534	300	18	enable	enable	VERB
futech-534	300	19	the	the	DET
futech-534	300	20	model	model	NOUN
futech-534	300	21	to	to	PART
futech-534	300	22	generalize	generalize	VERB
futech-534	300	23	with	with	ADP
futech-534	300	24	minimal	minimal	ADJ
futech-534	300	25	labeled	label	VERB
futech-534	300	26	data	datum	NOUN
futech-534	300	27	,	,	PUNCT
futech-534	300	28	as	as	SCONJ
futech-534	300	29	recommended	recommend	VERB
futech-534	300	30	by	by	ADP
futech-534	300	31	recent	recent	ADJ
futech-534	300	32	machine	machine	NOUN
futech-534	300	33	-	-	PUNCT
futech-534	300	34	learning	learn	VERB
futech-534	300	35	surveys	survey	NOUN
futech-534	300	36	[	[	X
futech-534	300	37	16,22	16,22	NOUN
futech-534	300	38	]	]	PUNCT
futech-534	300	39	.	.	PUNCT
futech-534	301	1	online	online	ADJ
futech-534	301	2	and	and	CCONJ
futech-534	301	3	continual	continual	ADJ
futech-534	301	4	learning	learning	NOUN
futech-534	301	5	extensions	extension	NOUN
futech-534	301	6	would	would	AUX
futech-534	301	7	further	far	ADV
futech-534	301	8	ensure	ensure	VERB
futech-534	301	9	real	real	ADJ
futech-534	301	10	-	-	PUNCT
futech-534	301	11	time	time	NOUN
futech-534	301	12	adaptability	adaptability	NOUN
futech-534	301	13	in	in	ADP
futech-534	301	14	evolving	evolve	VERB
futech-534	301	15	fab	fab	ADJ
futech-534	301	16	conditions	condition	NOUN
futech-534	301	17	.	.	PUNCT
futech-534	302	1	hybrid	hybrid	ADJ
futech-534	302	2	frameworks	framework	NOUN
futech-534	302	3	that	that	PRON
futech-534	302	4	combine	combine	VERB
futech-534	302	5	data	data	NOUN
futech-534	302	6	-	-	PUNCT
futech-534	302	7	driven	drive	VERB
futech-534	302	8	and	and	CCONJ
futech-534	302	9	physicsinformed	physicsinforme	VERB
futech-534	302	10	modeling	modeling	NOUN
futech-534	302	11	could	could	AUX
futech-534	302	12	improve	improve	VERB
futech-534	302	13	interpretability	interpretability	NOUN
futech-534	302	14	and	and	CCONJ
futech-534	302	15	extrapolation	extrapolation	NOUN
futech-534	302	16	to	to	ADP
futech-534	302	17	unseen	unseen	ADJ
futech-534	302	18	process	process	NOUN
futech-534	302	19	settings	setting	NOUN
futech-534	302	20	.	.	PUNCT
futech-534	303	1	additionally	additionally	ADV
futech-534	303	2	,	,	PUNCT
futech-534	303	3	uncertainty	uncertainty	NOUN
futech-534	303	4	quantification	quantification	NOUN
futech-534	303	5	techniques	technique	NOUN
futech-534	303	6	such	such	ADJ
futech-534	303	7	as	as	ADP
futech-534	303	8	bayesian	bayesian	NOUN
futech-534	303	9	neural	neural	ADJ
futech-534	303	10	networks	network	NOUN
futech-534	303	11	or	or	CCONJ
futech-534	303	12	monte	monte	PROPN
futech-534	303	13	-	-	PUNCT
futech-534	303	14	carlo	carlo	NOUN
futech-534	303	15	dropout	dropout	NOUN
futech-534	303	16	should	should	AUX
futech-534	303	17	be	be	AUX
futech-534	303	18	incorporated	incorporate	VERB
futech-534	303	19	to	to	PART
futech-534	303	20	provide	provide	VERB
futech-534	303	21	confidence	confidence	NOUN
futech-534	303	22	intervals	interval	NOUN
futech-534	303	23	around	around	ADP
futech-534	303	24	predictions	prediction	NOUN
futech-534	303	25	,	,	PUNCT
futech-534	303	26	facilitating	facilitate	VERB
futech-534	303	27	risk	risk	NOUN
futech-534	303	28	-	-	PUNCT
futech-534	303	29	aware	aware	ADJ
futech-534	303	30	production	production	NOUN
futech-534	303	31	planning	planning	NOUN
futech-534	303	32	.	.	PUNCT
futech-534	304	1	federated	federated	ADJ
futech-534	304	2	learning	learning	NOUN
futech-534	304	3	approaches	approach	NOUN
futech-534	304	4	,	,	PUNCT
futech-534	304	5	inspired	inspire	VERB
futech-534	304	6	by	by	ADP
futech-534	304	7	patel	patel	PROPN
futech-534	304	8	et	et	PROPN
futech-534	304	9	al	al	PROPN
futech-534	304	10	.	.	PUNCT
futech-534	305	1	[	[	X
futech-534	305	2	25	25	NUM
futech-534	305	3	]	]	PUNCT
futech-534	305	4	,	,	PUNCT
futech-534	305	5	could	could	AUX
futech-534	305	6	also	also	ADV
futech-534	305	7	enable	enable	VERB
futech-534	305	8	cross	cross	ADJ
futech-534	305	9	-	-	ADJ
futech-534	305	10	site	site	ADJ
futech-534	305	11	collaboration	collaboration	NOUN
futech-534	305	12	while	while	SCONJ
futech-534	305	13	maintaining	maintain	VERB
futech-534	305	14	data	data	NOUN
futech-534	305	15	privacy	privacy	NOUN
futech-534	305	16	.	.	PUNCT
futech-534	306	1	finally	finally	ADV
futech-534	306	2	,	,	PUNCT
futech-534	306	3	expanding	expand	VERB
futech-534	306	4	the	the	DET
futech-534	306	5	model	model	NOUN
futech-534	306	6	into	into	ADP
futech-534	306	7	a	a	DET
futech-534	306	8	multi	multi	ADJ
futech-534	306	9	-	-	ADJ
futech-534	306	10	task	task	ADJ
futech-534	306	11	configuration	configuration	NOUN
futech-534	306	12	that	that	PRON
futech-534	306	13	simultaneously	simultaneously	ADV
futech-534	306	14	predicts	predict	VERB
futech-534	306	15	cycle	cycle	NOUN
futech-534	306	16	time	time	NOUN
futech-534	306	17	,	,	PUNCT
futech-534	306	18	queue	queue	NOUN
futech-534	306	19	delay	delay	NOUN
futech-534	306	20	,	,	PUNCT
futech-534	306	21	and	and	CCONJ
futech-534	306	22	equipment	equipment	NOUN
futech-534	306	23	utilization	utilization	NOUN
futech-534	306	24	would	would	AUX
futech-534	306	25	advance	advance	VERB
futech-534	306	26	the	the	DET
futech-534	306	27	development	development	NOUN
futech-534	306	28	of	of	ADP
futech-534	306	29	comprehensive	comprehensive	ADJ
futech-534	306	30	smart	smart	ADJ
futech-534	306	31	-	-	PUNCT
futech-534	306	32	fab	fab	NOUN
futech-534	306	33	forecasting	forecasting	NOUN
futech-534	306	34	ecosystems	ecosystem	NOUN
futech-534	306	35	.	.	PUNCT
futech-534	307	1	in	in	ADP
futech-534	307	2	summary	summary	NOUN
futech-534	307	3	,	,	PUNCT
futech-534	307	4	the	the	DET
futech-534	307	5	discussion	discussion	NOUN
futech-534	307	6	confirms	confirm	VERB
futech-534	307	7	that	that	SCONJ
futech-534	307	8	hierarchical	hierarchical	ADJ
futech-534	307	9	transfer	transfer	NOUN
futech-534	307	10	learning	learn	VERB
futech-534	307	11	effectively	effectively	ADV
futech-534	307	12	captures	capture	VERB
futech-534	307	13	shared	share	VERB
futech-534	307	14	temporal	temporal	ADJ
futech-534	307	15	-	-	PUNCT
futech-534	307	16	spatial	spatial	ADJ
futech-534	307	17	dynamics	dynamic	NOUN
futech-534	307	18	across	across	ADP
futech-534	307	19	fabs	fab	NOUN
futech-534	307	20	,	,	PUNCT
futech-534	307	21	while	while	SCONJ
futech-534	307	22	bayesian	bayesian	NOUN
futech-534	307	23	tpe	tpe	NOUN
futech-534	307	24	optimization	optimization	NOUN
futech-534	307	25	ensures	ensure	VERB
futech-534	307	26	model	model	NOUN
futech-534	307	27	stability	stability	NOUN
futech-534	307	28	and	and	CCONJ
futech-534	307	29	efficiency	efficiency	NOUN
futech-534	307	30	.	.	PUNCT
futech-534	308	1	the	the	DET
futech-534	308	2	htlhpo	htlhpo	NOUN
futech-534	308	3	framework	framework	NOUN
futech-534	308	4	thus	thus	ADV
futech-534	308	5	represents	represent	VERB
futech-534	308	6	a	a	DET
futech-534	308	7	coherent	coherent	ADJ
futech-534	308	8	integration	integration	NOUN
futech-534	308	9	of	of	ADP
futech-534	308	10	theories	theory	NOUN
futech-534	308	11	from	from	ADP
futech-534	308	12	prior	prior	ADJ
futech-534	308	13	research	research	NOUN
futech-534	308	14	,	,	PUNCT
futech-534	308	15	yielding	yield	VERB
futech-534	308	16	a	a	DET
futech-534	308	17	scalable	scalable	ADJ
futech-534	308	18	,	,	PUNCT
futech-534	308	19	interpretable	interpretable	ADJ
futech-534	308	20	,	,	PUNCT
futech-534	308	21	and	and	CCONJ
futech-534	308	22	empirically	empirically	ADV
futech-534	308	23	validated	validate	VERB
futech-534	308	24	solution	solution	NOUN
futech-534	308	25	for	for	ADP
futech-534	308	26	intelligent	intelligent	ADJ
futech-534	308	27	semiconductor	semiconductor	NOUN
futech-534	308	28	manufacturing	manufacturing	NOUN
futech-534	308	29	.	.	PUNCT
futech-534	309	1	6	6	X
futech-534	309	2	.	.	X
futech-534	309	3	conclusion	conclusion	NOUN
futech-534	309	4	this	this	DET
futech-534	309	5	study	study	NOUN
futech-534	309	6	developed	develop	VERB
futech-534	309	7	and	and	CCONJ
futech-534	309	8	validated	validate	VERB
futech-534	309	9	an	an	DET
futech-534	309	10	optimized	optimize	VERB
futech-534	309	11	hierarchical	hierarchical	ADJ
futech-534	309	12	transfer	transfer	NOUN
futech-534	309	13	learning	learn	VERB
futech-534	309	14	with	with	ADP
futech-534	309	15	hyperparameter	hyperparameter	NOUN
futech-534	309	16	optimization	optimization	NOUN
futech-534	309	17	(	(	PUNCT
futech-534	309	18	htl	htl	PROPN
futech-534	309	19	-	-	PUNCT
futech-534	309	20	hpo	hpo	PROPN
futech-534	309	21	)	)	PUNCT
futech-534	309	22	framework	framework	NOUN
futech-534	309	23	to	to	PART
futech-534	309	24	enhance	enhance	VERB
futech-534	309	25	cycle	cycle	NOUN
futech-534	309	26	-	-	PUNCT
futech-534	309	27	time	time	NOUN
futech-534	309	28	forecasting	forecasting	NOUN
futech-534	309	29	in	in	ADP
futech-534	309	30	semiconductor	semiconductor	NOUN
futech-534	309	31	wafer	wafer	NOUN
futech-534	309	32	fabrication	fabrication	NOUN
futech-534	309	33	.	.	PUNCT
futech-534	310	1	the	the	DET
futech-534	310	2	results	result	NOUN
futech-534	310	3	confirm	confirm	VERB
futech-534	310	4	that	that	SCONJ
futech-534	310	5	integrating	integrate	VERB
futech-534	310	6	hierarchical	hierarchical	ADJ
futech-534	310	7	transfer	transfer	NOUN
futech-534	310	8	learning	learn	VERB
futech-534	310	9	with	with	ADP
futech-534	310	10	bayesian	bayesian	NOUN
futech-534	310	11	tpe	tpe	NOUN
futech-534	310	12	-	-	PUNCT
futech-534	310	13	based	base	VERB
futech-534	310	14	optimization	optimization	NOUN
futech-534	310	15	significantly	significantly	ADV
futech-534	310	16	improves	improve	VERB
futech-534	310	17	predictive	predictive	ADJ
futech-534	310	18	accuracy	accuracy	NOUN
futech-534	310	19	,	,	PUNCT
futech-534	310	20	stability	stability	NOUN
futech-534	310	21	,	,	PUNCT
futech-534	310	22	and	and	CCONJ
futech-534	310	23	generalization	generalization	NOUN
futech-534	310	24	compared	compare	VERB
futech-534	310	25	to	to	ADP
futech-534	310	26	established	establish	VERB
futech-534	310	27	baselines	baseline	NOUN
futech-534	310	28	such	such	ADJ
futech-534	310	29	as	as	ADP
futech-534	310	30	lstm	lstm	PROPN
futech-534	310	31	,	,	PUNCT
futech-534	310	32	gru	gru	PROPN
futech-534	310	33	,	,	PUNCT
futech-534	310	34	and	and	CCONJ
futech-534	310	35	decision	decision	NOUN
futech-534	310	36	tree	tree	NOUN
futech-534	310	37	models	model	NOUN
futech-534	310	38	.	.	PUNCT
futech-534	311	1	the	the	DET
futech-534	311	2	model	model	NOUN
futech-534	311	3	achieved	achieve	VERB
futech-534	311	4	the	the	DET
futech-534	311	5	lowest	low	ADJ
futech-534	311	6	error	error	NOUN
futech-534	311	7	rates	rate	NOUN
futech-534	311	8	(	(	PUNCT
futech-534	311	9	mse	mse	NOUN
futech-534	311	10	=	=	SYM
futech-534	311	11	0.006	0.006	NUM
futech-534	311	12	;	;	PUNCT
futech-534	311	13	rmse	rmse	NOUN
futech-534	311	14	=	=	PROPN
futech-534	311	15	0.079	0.079	NUM
futech-534	311	16	)	)	PUNCT
futech-534	311	17	and	and	CCONJ
futech-534	311	18	the	the	DET
futech-534	311	19	highest	high	ADJ
futech-534	311	20	r²	r²	NOUN
futech-534	311	21	=	=	NOUN
futech-534	311	22	0.934	0.934	NUM
futech-534	311	23	,	,	PUNCT
futech-534	311	24	clearly	clearly	ADV
futech-534	311	25	demonstrating	demonstrate	VERB
futech-534	311	26	its	its	PRON
futech-534	311	27	ability	ability	NOUN
futech-534	311	28	to	to	PART
futech-534	311	29	capture	capture	VERB
futech-534	311	30	nonlinear	nonlinear	ADJ
futech-534	311	31	,	,	PUNCT
futech-534	311	32	cross	cross	ADJ
futech-534	311	33	-	-	ADJ
futech-534	311	34	fab	fab	ADJ
futech-534	311	35	temporal	temporal	ADJ
futech-534	311	36	–	–	PUNCT
futech-534	311	37	spatial	spatial	ADJ
futech-534	311	38	patterns	pattern	NOUN
futech-534	311	39	that	that	PRON
futech-534	311	40	traditional	traditional	ADJ
futech-534	311	41	and	and	CCONJ
futech-534	311	42	single	single	ADJ
futech-534	311	43	-	-	PUNCT
futech-534	311	44	domain	domain	NOUN
futech-534	311	45	models	model	NOUN
futech-534	311	46	overlook	overlook	VERB
futech-534	311	47	.	.	PUNCT
futech-534	312	1	the	the	DET
futech-534	312	2	findings	finding	NOUN
futech-534	312	3	imply	imply	VERB
futech-534	312	4	that	that	SCONJ
futech-534	312	5	hierarchical	hierarchical	ADJ
futech-534	312	6	adaptation	adaptation	NOUN
futech-534	312	7	and	and	CCONJ
futech-534	312	8	probabilistic	probabilistic	ADJ
futech-534	312	9	optimization	optimization	NOUN
futech-534	312	10	can	can	AUX
futech-534	312	11	jointly	jointly	ADV
futech-534	312	12	transform	transform	VERB
futech-534	312	13	forecasting	forecasting	NOUN
futech-534	312	14	efficiency	efficiency	NOUN
futech-534	312	15	in	in	ADP
futech-534	312	16	semiconductor	semiconductor	NOUN
futech-534	312	17	manufacturing	manufacturing	NOUN
futech-534	312	18	.	.	PUNCT
futech-534	313	1	accurate	accurate	ADJ
futech-534	313	2	cycle	cycle	NOUN
futech-534	313	3	-	-	PUNCT
futech-534	313	4	time	time	NOUN
futech-534	313	5	prediction	prediction	NOUN
futech-534	313	6	enables	enable	VERB
futech-534	313	7	better	well	ADJ
futech-534	313	8	scheduling	scheduling	NOUN
futech-534	313	9	,	,	PUNCT
futech-534	313	10	capacity	capacity	NOUN
futech-534	313	11	planning	planning	NOUN
futech-534	313	12	,	,	PUNCT
futech-534	313	13	and	and	CCONJ
futech-534	313	14	resource	resource	NOUN
futech-534	313	15	allocation	allocation	NOUN
futech-534	313	16	,	,	PUNCT
futech-534	313	17	ka	ka	PROPN
futech-534	313	18	.	.	PROPN
futech-534	313	19	kumar	kumar	PROPN
futech-534	313	20	&	&	CCONJ
futech-534	313	21	k.	k.	PROPN
futech-534	313	22	hemachandran	hemachandran	PROPN
futech-534	313	23	/	/	SYM
futech-534	313	24	future	future	ADJ
futech-534	313	25	technology	technology	NOUN
futech-534	313	26	february	february	PROPN
futech-534	313	27	2026|	2026|	NUM
futech-534	313	28	volume	volume	NOUN
futech-534	313	29	05	05	NUM
futech-534	314	1	|	|	ADV
futech-534	314	2	issue	issue	NOUN
futech-534	314	3	01	01	NUM
futech-534	315	1	|	|	ADV
futech-534	315	2	pages	page	VERB
futech-534	315	3	55	55	NUM
futech-534	315	4	-	-	SYM
futech-534	315	5	64	64	NUM
futech-534	315	6	63	63	NUM
futech-534	315	7	leading	lead	VERB
futech-534	315	8	to	to	ADP
futech-534	315	9	higher	high	ADJ
futech-534	315	10	throughput	throughput	NOUN
futech-534	315	11	and	and	CCONJ
futech-534	315	12	reduced	reduced	ADJ
futech-534	315	13	production	production	NOUN
futech-534	315	14	volatility	volatility	NOUN
futech-534	315	15	.	.	PUNCT
futech-534	316	1	the	the	DET
futech-534	316	2	framework	framework	NOUN
futech-534	316	3	also	also	ADV
futech-534	316	4	supports	support	VERB
futech-534	316	5	faster	fast	ADJ
futech-534	316	6	deployment	deployment	NOUN
futech-534	316	7	across	across	ADP
futech-534	316	8	fabs	fab	NOUN
futech-534	316	9	through	through	ADP
futech-534	316	10	knowledge	knowledge	NOUN
futech-534	316	11	reuse	reuse	NOUN
futech-534	316	12	and	and	CCONJ
futech-534	316	13	aligns	align	VERB
futech-534	316	14	with	with	ADP
futech-534	316	15	sustainable	sustainable	ADJ
futech-534	316	16	manufacturing	manufacturing	NOUN
futech-534	316	17	principles	principle	NOUN
futech-534	316	18	by	by	ADP
futech-534	316	19	minimizing	minimize	VERB
futech-534	316	20	rework	rework	NOUN
futech-534	316	21	,	,	PUNCT
futech-534	316	22	tool	tool	NOUN
futech-534	316	23	idling	idle	VERB
futech-534	316	24	,	,	PUNCT
futech-534	316	25	and	and	CCONJ
futech-534	316	26	energy	energy	NOUN
futech-534	316	27	waste	waste	NOUN
futech-534	316	28	.	.	PUNCT
futech-534	317	1	for	for	ADP
futech-534	317	2	practitioners	practitioner	NOUN
futech-534	317	3	,	,	PUNCT
futech-534	317	4	adopting	adopt	VERB
futech-534	317	5	the	the	DET
futech-534	317	6	htl	htl	PROPN
futech-534	317	7	-	-	PUNCT
futech-534	317	8	hpo	hpo	PROPN
futech-534	317	9	model	model	NOUN
futech-534	317	10	means	mean	VERB
futech-534	317	11	improved	improve	VERB
futech-534	317	12	operational	operational	ADJ
futech-534	317	13	reliability	reliability	NOUN
futech-534	317	14	and	and	CCONJ
futech-534	317	15	a	a	DET
futech-534	317	16	stronger	strong	ADJ
futech-534	317	17	foundation	foundation	NOUN
futech-534	317	18	for	for	ADP
futech-534	317	19	digital	digital	ADJ
futech-534	317	20	-	-	PUNCT
futech-534	317	21	twin	twin	NOUN
futech-534	317	22	integration	integration	NOUN
futech-534	317	23	and	and	CCONJ
futech-534	317	24	predictive	predictive	ADJ
futech-534	317	25	decision	decision	NOUN
futech-534	317	26	-	-	PUNCT
futech-534	317	27	support	support	NOUN
futech-534	317	28	systems	system	NOUN
futech-534	317	29	.	.	PUNCT
futech-534	318	1	based	base	VERB
futech-534	318	2	on	on	ADP
futech-534	318	3	the	the	DET
futech-534	318	4	observed	observed	ADJ
futech-534	318	5	outcomes	outcome	NOUN
futech-534	318	6	,	,	PUNCT
futech-534	318	7	several	several	ADJ
futech-534	318	8	recommendations	recommendation	NOUN
futech-534	318	9	are	be	AUX
futech-534	318	10	proposed	propose	VERB
futech-534	318	11	.	.	PUNCT
futech-534	319	1	industrial	industrial	ADJ
futech-534	319	2	engineers	engineer	NOUN
futech-534	319	3	should	should	AUX
futech-534	319	4	implement	implement	VERB
futech-534	319	5	hierarchical	hierarchical	ADJ
futech-534	319	6	transfer	transfer	NOUN
futech-534	319	7	learning	learn	VERB
futech-534	319	8	pipelines	pipeline	NOUN
futech-534	319	9	for	for	ADP
futech-534	319	10	cross	cross	ADJ
futech-534	319	11	-	-	ADJ
futech-534	319	12	fab	fab	ADJ
futech-534	319	13	model	model	NOUN
futech-534	319	14	reuse	reuse	NOUN
futech-534	319	15	and	and	CCONJ
futech-534	319	16	apply	apply	VERB
futech-534	319	17	bayesian	bayesian	NOUN
futech-534	319	18	optimization	optimization	NOUN
futech-534	319	19	to	to	PART
futech-534	319	20	automate	automate	VERB
futech-534	319	21	hyperparameter	hyperparameter	NOUN
futech-534	319	22	tuning	tuning	NOUN
futech-534	319	23	.	.	PUNCT
futech-534	320	1	integrating	integrate	VERB
futech-534	320	2	such	such	ADJ
futech-534	320	3	intelligent	intelligent	ADJ
futech-534	320	4	forecasting	forecasting	NOUN
futech-534	320	5	into	into	ADP
futech-534	320	6	production	production	NOUN
futech-534	320	7	control	control	NOUN
futech-534	320	8	systems	system	NOUN
futech-534	320	9	could	could	AUX
futech-534	320	10	enhance	enhance	VERB
futech-534	320	11	responsiveness	responsiveness	NOUN
futech-534	320	12	and	and	CCONJ
futech-534	320	13	transparency	transparency	NOUN
futech-534	320	14	in	in	ADP
futech-534	320	15	fab	fab	NOUN
futech-534	320	16	operations	operation	NOUN
futech-534	320	17	.	.	PUNCT
futech-534	321	1	future	future	ADJ
futech-534	321	2	research	research	NOUN
futech-534	321	3	should	should	AUX
futech-534	321	4	expand	expand	VERB
futech-534	321	5	validation	validation	NOUN
futech-534	321	6	across	across	ADP
futech-534	321	7	multiple	multiple	ADJ
futech-534	321	8	semiconductor	semiconductor	NOUN
futech-534	321	9	technologies	technology	NOUN
futech-534	321	10	and	and	CCONJ
futech-534	321	11	explore	explore	VERB
futech-534	321	12	metalearning	metalearning	NOUN
futech-534	321	13	,	,	PUNCT
futech-534	321	14	self	self	NOUN
futech-534	321	15	-	-	PUNCT
futech-534	321	16	supervised	supervise	VERB
futech-534	321	17	,	,	PUNCT
futech-534	321	18	and	and	CCONJ
futech-534	321	19	physics	physics	NOUN
futech-534	321	20	-	-	PUNCT
futech-534	321	21	informed	inform	VERB
futech-534	321	22	approaches	approach	NOUN
futech-534	321	23	to	to	PART
futech-534	321	24	reduce	reduce	VERB
futech-534	321	25	data	datum	NOUN
futech-534	321	26	dependence	dependence	NOUN
futech-534	321	27	further	far	ADV
futech-534	321	28	.	.	PUNCT
futech-534	322	1	incorporating	incorporate	VERB
futech-534	322	2	online	online	ADV
futech-534	322	3	and	and	CCONJ
futech-534	322	4	federated	federated	ADJ
futech-534	322	5	learning	learning	NOUN
futech-534	322	6	mechanisms	mechanism	NOUN
futech-534	322	7	would	would	AUX
futech-534	322	8	also	also	ADV
futech-534	322	9	enable	enable	VERB
futech-534	322	10	real	real	ADJ
futech-534	322	11	-	-	PUNCT
futech-534	322	12	time	time	NOUN
futech-534	322	13	adaptability	adaptability	NOUN
futech-534	322	14	and	and	CCONJ
futech-534	322	15	privacy	privacy	NOUN
futech-534	322	16	-	-	PUNCT
futech-534	322	17	preserving	preserve	VERB
futech-534	322	18	collaboration	collaboration	NOUN
futech-534	322	19	among	among	ADP
futech-534	322	20	fabs	fab	NOUN
futech-534	322	21	.	.	PUNCT
futech-534	323	1	in	in	ADP
futech-534	323	2	essence	essence	NOUN
futech-534	323	3	,	,	PUNCT
futech-534	323	4	this	this	DET
futech-534	323	5	research	research	NOUN
futech-534	323	6	lays	lay	VERB
futech-534	323	7	a	a	DET
futech-534	323	8	foundation	foundation	NOUN
futech-534	323	9	for	for	ADP
futech-534	323	10	scalable	scalable	ADJ
futech-534	323	11	,	,	PUNCT
futech-534	323	12	interpretable	interpretable	ADJ
futech-534	323	13	,	,	PUNCT
futech-534	323	14	and	and	CCONJ
futech-534	323	15	sustainable	sustainable	ADJ
futech-534	323	16	ai	ai	NOUN
futech-534	323	17	-	-	PUNCT
futech-534	323	18	driven	drive	VERB
futech-534	323	19	forecasting	forecasting	NOUN
futech-534	323	20	in	in	ADP
futech-534	323	21	nextgeneration	nextgeneration	NOUN
futech-534	323	22	smart	smart	ADJ
futech-534	323	23	semiconductor	semiconductor	NOUN
futech-534	323	24	manufacturing	manufacturing	NOUN
futech-534	323	25	.	.	PUNCT
futech-534	324	1	ethical	ethical	ADJ
futech-534	324	2	issue	issue	NOUN
futech-534	324	3	the	the	DET
futech-534	324	4	authors	author	NOUN
futech-534	324	5	are	be	AUX
futech-534	324	6	aware	aware	ADJ
futech-534	324	7	of	of	ADP
futech-534	324	8	and	and	CCONJ
futech-534	324	9	comply	comply	ADJ
futech-534	324	10	with	with	ADP
futech-534	324	11	best	good	ADJ
futech-534	324	12	practices	practice	NOUN
futech-534	324	13	in	in	ADP
futech-534	324	14	publication	publication	NOUN
futech-534	324	15	ethics	ethic	NOUN
futech-534	324	16	,	,	PUNCT
futech-534	324	17	specifically	specifically	ADV
futech-534	324	18	with	with	ADP
futech-534	324	19	regard	regard	NOUN
futech-534	324	20	to	to	ADP
futech-534	324	21	authorship	authorship	NOUN
futech-534	324	22	(	(	PUNCT
futech-534	324	23	avoidance	avoidance	NOUN
futech-534	324	24	of	of	ADP
futech-534	324	25	guest	guest	NOUN
futech-534	324	26	authorship	authorship	NOUN
futech-534	324	27	)	)	PUNCT
futech-534	324	28	,	,	PUNCT
futech-534	324	29	dual	dual	ADJ
futech-534	324	30	submission	submission	NOUN
futech-534	324	31	,	,	PUNCT
futech-534	324	32	manipulation	manipulation	NOUN
futech-534	324	33	of	of	ADP
futech-534	324	34	figures	figure	NOUN
futech-534	324	35	,	,	PUNCT
futech-534	324	36	competing	compete	VERB
futech-534	324	37	interests	interest	NOUN
futech-534	324	38	,	,	PUNCT
futech-534	324	39	and	and	CCONJ
futech-534	324	40	compliance	compliance	NOUN
futech-534	324	41	with	with	ADP
futech-534	324	42	policies	policy	NOUN
futech-534	324	43	on	on	ADP
futech-534	324	44	research	research	NOUN
futech-534	324	45	ethics	ethic	NOUN
futech-534	324	46	.	.	PUNCT
futech-534	325	1	the	the	DET
futech-534	325	2	authors	author	NOUN
futech-534	325	3	adhere	adhere	VERB
futech-534	325	4	to	to	ADP
futech-534	325	5	publication	publication	NOUN
futech-534	325	6	requirements	requirement	NOUN
futech-534	325	7	that	that	SCONJ
futech-534	325	8	the	the	DET
futech-534	325	9	submitted	submit	VERB
futech-534	325	10	work	work	NOUN
futech-534	325	11	is	be	AUX
futech-534	325	12	original	original	ADJ
futech-534	325	13	and	and	CCONJ
futech-534	325	14	has	have	AUX
futech-534	325	15	not	not	PART
futech-534	325	16	been	be	AUX
futech-534	325	17	published	publish	VERB
futech-534	325	18	elsewhere	elsewhere	ADV
futech-534	325	19	.	.	PUNCT
futech-534	326	1	data	datum	NOUN
futech-534	326	2	availability	availability	NOUN
futech-534	326	3	statement	statement	NOUN
futech-534	326	4	the	the	DET
futech-534	326	5	manuscript	manuscript	NOUN
futech-534	326	6	contains	contain	VERB
futech-534	326	7	all	all	DET
futech-534	326	8	the	the	DET
futech-534	326	9	data	datum	NOUN
futech-534	326	10	.	.	PUNCT
futech-534	327	1	however	however	ADV
futech-534	327	2	,	,	PUNCT
futech-534	327	3	more	more	ADJ
futech-534	327	4	data	datum	NOUN
futech-534	327	5	will	will	AUX
futech-534	327	6	be	be	AUX
futech-534	327	7	available	available	ADJ
futech-534	327	8	upon	upon	SCONJ
futech-534	327	9	request	request	NOUN
futech-534	327	10	from	from	ADP
futech-534	327	11	the	the	DET
futech-534	327	12	authors	author	NOUN
futech-534	327	13	.	.	PUNCT
futech-534	328	1	conflict	conflict	NOUN
futech-534	328	2	of	of	ADP
futech-534	328	3	interest	interest	NOUN
futech-534	328	4	the	the	DET
futech-534	328	5	authors	author	NOUN
futech-534	328	6	declare	declare	VERB
futech-534	328	7	no	no	DET
futech-534	328	8	potential	potential	ADJ
futech-534	328	9	conflict	conflict	NOUN
futech-534	328	10	of	of	ADP
futech-534	328	11	interest	interest	NOUN
futech-534	328	12	.	.	PUNCT
futech-534	329	1	references	reference	NOUN
futech-534	329	2	[	[	X
futech-534	329	3	1	1	NUM
futech-534	329	4	]	]	X
futech-534	329	5	wang	wang	PROPN
futech-534	329	6	,	,	PUNCT
futech-534	329	7	j.	j.	PROPN
futech-534	329	8	,	,	PUNCT
futech-534	329	9	gao	gao	PROPN
futech-534	329	10	,	,	PUNCT
futech-534	329	11	p.	p.	PROPN
futech-534	329	12	,	,	PUNCT
futech-534	329	13	zheng	zheng	PROPN
futech-534	329	14	,	,	PUNCT
futech-534	329	15	p.	p.	PROPN
futech-534	329	16	,	,	PUNCT
futech-534	329	17	zhang	zhang	PROPN
futech-534	329	18	,	,	PUNCT
futech-534	329	19	j.	j.	PROPN
futech-534	329	20	,	,	PUNCT
futech-534	329	21	&	&	CCONJ
futech-534	329	22	ip	ip	PROPN
futech-534	329	23	,	,	PUNCT
futech-534	329	24	w.	w.	PROPN
futech-534	329	25	h.	h.	PROPN
futech-534	329	26	(	(	PUNCT
futech-534	329	27	2021	2021	NUM
futech-534	329	28	)	)	PUNCT
futech-534	329	29	.	.	PUNCT
futech-534	330	1	a	a	DET
futech-534	330	2	fuzzy	fuzzy	ADJ
futech-534	330	3	hierarchical	hierarchical	ADJ
futech-534	330	4	reinforcement	reinforcement	NOUN
futech-534	330	5	learning	learning	NOUN
futech-534	330	6	based	base	VERB
futech-534	330	7	scheduling	scheduling	NOUN
futech-534	330	8	method	method	NOUN
futech-534	330	9	for	for	ADP
futech-534	330	10	semiconductor	semiconductor	NOUN
futech-534	330	11	wafer	wafer	NOUN
futech-534	330	12	manufacturing	manufacturing	NOUN
futech-534	330	13	systems	system	NOUN
futech-534	330	14	.	.	PUNCT
futech-534	331	1	journal	journal	NOUN
futech-534	331	2	of	of	ADP
futech-534	331	3	manufacturing	manufacturing	NOUN
futech-534	331	4	systems	system	NOUN
futech-534	331	5	,	,	PUNCT
futech-534	331	6	61	61	NUM
futech-534	331	7	,	,	PUNCT
futech-534	331	8	239	239	NUM
futech-534	331	9	-	-	SYM
futech-534	331	10	248	248	NUM
futech-534	331	11	.	.	PUNCT
futech-534	332	1	https://doi.org/10.1016/j.jmsy.2021.08.008	https://doi.org/10.1016/j.jmsy.2021.08.008	NOUN
futech-534	333	1	[	[	X
futech-534	333	2	2	2	NUM
futech-534	333	3	]	]	X
futech-534	333	4	leray	leray	ADJ
futech-534	333	5	,	,	PUNCT
futech-534	333	6	p.	p.	NOUN
futech-534	333	7	,	,	PUNCT
futech-534	333	8	&	&	CCONJ
futech-534	333	9	de	de	PROPN
futech-534	333	10	gendt	gendt	PROPN
futech-534	333	11	,	,	PUNCT
futech-534	333	12	s.	s.	PROPN
futech-534	333	13	(	(	PUNCT
futech-534	333	14	2024	2024	NUM
futech-534	333	15	)	)	PUNCT
futech-534	333	16	.	.	PUNCT
futech-534	334	1	exploring	explore	VERB
futech-534	334	2	machine	machine	NOUN
futech-534	334	3	learning	learning	NOUN
futech-534	334	4	for	for	ADP
futech-534	334	5	semiconductor	semiconductor	NOUN
futech-534	334	6	process	process	NOUN
futech-534	334	7	optimization	optimization	NOUN
futech-534	334	8	:	:	PUNCT
futech-534	334	9	a	a	DET
futech-534	334	10	systematiclreview	systematiclreview	NOUN
futech-534	334	11	.	.	PUNCT
futech-534	335	1	[	[	X
futech-534	335	2	3	3	NUM
futech-534	335	3	]	]	X
futech-534	335	4	chen	chen	PROPN
futech-534	335	5	,	,	PUNCT
futech-534	335	6	y.	y.	PROPN
futech-534	335	7	l.	l.	PROPN
futech-534	335	8	,	,	PUNCT
futech-534	335	9	sacchi	sacchi	PROPN
futech-534	335	10	,	,	PUNCT
futech-534	335	11	s.	s.	PROPN
futech-534	335	12	,	,	PUNCT
futech-534	335	13	dey	dey	PROPN
futech-534	335	14	,	,	PUNCT
futech-534	335	15	b.	b.	PROPN
futech-534	335	16	,	,	PUNCT
futech-534	335	17	blanco	blanco	PROPN
futech-534	335	18	,	,	PUNCT
futech-534	335	19	v.	v.	PROPN
futech-534	335	20	,	,	PUNCT
futech-534	335	21	halder	halder	PROPN
futech-534	335	22	,	,	PUNCT
futech-534	335	23	s.	s.	PROPN
futech-534	335	24	,	,	PUNCT
futech-534	335	25	leray	leray	ADJ
futech-534	335	26	,	,	PUNCT
futech-534	335	27	p.	p.	NOUN
futech-534	335	28	,	,	PUNCT
futech-534	335	29	&	&	CCONJ
futech-534	335	30	de	de	PROPN
futech-534	335	31	gendt	gendt	PROPN
futech-534	335	32	,	,	PUNCT
futech-534	335	33	s.	s.	PROPN
futech-534	335	34	(	(	PUNCT
futech-534	335	35	2024	2024	NUM
futech-534	335	36	)	)	PUNCT
futech-534	335	37	.	.	PUNCT
futech-534	336	1	exploring	explore	VERB
futech-534	336	2	machine	machine	NOUN
futech-534	336	3	learning	learning	NOUN
futech-534	336	4	for	for	ADP
futech-534	336	5	semiconductor	semiconductor	NOUN
futech-534	336	6	process	process	NOUN
futech-534	336	7	optimization	optimization	NOUN
futech-534	336	8	:	:	PUNCT
futech-534	336	9	a	a	DET
futech-534	336	10	systematic	systematic	ADJ
futech-534	336	11	review	review	NOUN
futech-534	336	12	.	.	PUNCT
futech-534	337	1	ieee	ieee	NOUN
futech-534	337	2	transactions	transaction	NOUN
futech-534	337	3	on	on	ADP
futech-534	337	4	artificial	artificial	ADJ
futech-534	337	5	intelligence	intelligence	NOUN
futech-534	337	6	.	.	PUNCT
futech-534	338	1	doi	doi	NOUN
futech-534	338	2	:	:	PUNCT
futech-534	338	3	10.36227	10.36227	NUM
futech-534	338	4	/	/	SYM
futech-534	338	5	techrxiv.172114788.85190557	techrxiv.172114788.85190557	NOUN
futech-534	338	6	/	/	SYM
futech-534	338	7	v1	v1	NOUN
futech-534	338	8	[	[	X
futech-534	338	9	4	4	NUM
futech-534	338	10	]	]	PUNCT
futech-534	338	11	gentner	gentner	NOUN
futech-534	338	12	,	,	PUNCT
futech-534	338	13	n.	n.	NOUN
futech-534	338	14	,	,	PUNCT
futech-534	338	15	2023	2023	NUM
futech-534	338	16	.	.	PUNCT
futech-534	339	1	enhancing	enhance	VERB
futech-534	339	2	scalability	scalability	NOUN
futech-534	339	3	of	of	ADP
futech-534	339	4	deep	deep	ADJ
futech-534	339	5	learning	learning	NOUN
futech-534	339	6	based	base	VERB
futech-534	339	7	approaches	approach	NOUN
futech-534	339	8	in	in	ADP
futech-534	339	9	semiconductor	semiconductor	NOUN
futech-534	339	10	manufacturing	manufacturing	NOUN
futech-534	339	11	.	.	PUNCT
futech-534	340	1	[	[	X
futech-534	340	2	5	5	NUM
futech-534	340	3	]	]	PUNCT
futech-534	340	4	rashidi	rashidi	NOUN
futech-534	340	5	,	,	PUNCT
futech-534	340	6	e.	e.	PROPN
futech-534	340	7	,	,	PUNCT
futech-534	340	8	bhuiyan	bhuiyan	PROPN
futech-534	340	9	,	,	PUNCT
futech-534	340	10	t.	t.	PROPN
futech-534	340	11	h.	h.	PROPN
futech-534	340	12	,	,	PUNCT
futech-534	340	13	&	&	CCONJ
futech-534	340	14	mason	mason	PROPN
futech-534	340	15	,	,	PUNCT
futech-534	340	16	s.	s.	PROPN
futech-534	340	17	j.	j.	PROPN
futech-534	340	18	(	(	PUNCT
futech-534	340	19	2024	2024	NUM
futech-534	340	20	)	)	PUNCT
futech-534	340	21	.	.	PUNCT
futech-534	341	1	production	production	NOUN
futech-534	341	2	planning	planning	NOUN
futech-534	341	3	for	for	ADP
futech-534	341	4	semiconductor	semiconductor	NOUN
futech-534	341	5	manufacturing	manufacturing	NOUN
futech-534	341	6	under	under	ADP
futech-534	341	7	demand	demand	NOUN
futech-534	341	8	and	and	CCONJ
futech-534	341	9	yield	yield	VERB
futech-534	341	10	uncertainty	uncertainty	NOUN
futech-534	341	11	.	.	PUNCT
futech-534	342	1	computers	computer	NOUN
futech-534	342	2	&	&	CCONJ
futech-534	342	3	industrial	industrial	ADJ
futech-534	342	4	engineering	engineering	NOUN
futech-534	342	5	,	,	PUNCT
futech-534	342	6	196	196	NUM
futech-534	342	7	,	,	PUNCT
futech-534	342	8	110403	110403	NUM
futech-534	342	9	.	.	PUNCT
futech-534	343	1	https://doi.org/10.1016/j.cie.2024.110403	https://doi.org/10.1016/j.cie.2024.110403	NOUN
futech-534	344	1	[	[	X
futech-534	344	2	6	6	NUM
futech-534	344	3	]	]	X
futech-534	344	4	taha	taha	PROPN
futech-534	344	5	,	,	PUNCT
futech-534	344	6	k.	k.	PROPN
futech-534	344	7	(	(	PUNCT
futech-534	344	8	2023	2023	NUM
futech-534	344	9	)	)	PUNCT
futech-534	344	10	.	.	PUNCT
futech-534	344	11	machine	machine	NOUN
futech-534	344	12	learning	learn	VERB
futech-534	344	13	techniques	technique	NOUN
futech-534	344	14	for	for	ADP
futech-534	344	15	identifying	identify	VERB
futech-534	344	16	the	the	DET
futech-534	344	17	defective	defective	ADJ
futech-534	344	18	patterns	pattern	NOUN
futech-534	344	19	in	in	ADP
futech-534	344	20	semiconductor	semiconductor	NOUN
futech-534	344	21	wafer	wafer	NOUN
futech-534	344	22	maps	map	NOUN
futech-534	344	23	:	:	PUNCT
futech-534	344	24	a	a	DET
futech-534	344	25	survey	survey	NOUN
futech-534	344	26	,	,	PUNCT
futech-534	344	27	empirical	empirical	ADJ
futech-534	344	28	,	,	PUNCT
futech-534	344	29	and	and	CCONJ
futech-534	344	30	experimental	experimental	ADJ
futech-534	344	31	evaluations	evaluation	NOUN
futech-534	344	32	.	.	PUNCT
futech-534	345	1	https://doi.org/10.1007/s10845-02402521-0	https://doi.org/10.1007/s10845-02402521-0	ADJ
futech-534	345	2	[	[	X
futech-534	345	3	7	7	NUM
futech-534	345	4	]	]	X
futech-534	345	5	huang	huang	PROPN
futech-534	345	6	,	,	PUNCT
futech-534	345	7	a.	a.	PROPN
futech-534	345	8	c.	c.	PROPN
futech-534	345	9	,	,	PUNCT
futech-534	345	10	meng	meng	PROPN
futech-534	345	11	,	,	PUNCT
futech-534	345	12	s.	s.	PROPN
futech-534	345	13	h.	h.	PROPN
futech-534	345	14	,	,	PUNCT
futech-534	345	15	&	&	CCONJ
futech-534	345	16	huang	huang	PROPN
futech-534	345	17	,	,	PUNCT
futech-534	345	18	t.	t.	PROPN
futech-534	345	19	j.	j.	PROPN
futech-534	345	20	(	(	PUNCT
futech-534	345	21	2023	2023	NUM
futech-534	345	22	)	)	PUNCT
futech-534	345	23	.	.	PUNCT
futech-534	346	1	a	a	DET
futech-534	346	2	survey	survey	NOUN
futech-534	346	3	on	on	ADP
futech-534	346	4	machine	machine	NOUN
futech-534	346	5	and	and	CCONJ
futech-534	346	6	deep	deep	ADJ
futech-534	346	7	learning	learning	NOUN
futech-534	346	8	in	in	ADP
futech-534	346	9	semiconductor	semiconductor	NOUN
futech-534	346	10	industry	industry	NOUN
futech-534	346	11	:	:	PUNCT
futech-534	346	12	methods	method	NOUN
futech-534	346	13	,	,	PUNCT
futech-534	346	14	opportunities	opportunity	NOUN
futech-534	346	15	,	,	PUNCT
futech-534	346	16	and	and	CCONJ
futech-534	346	17	challenges	challenge	NOUN
futech-534	346	18	.	.	PUNCT
futech-534	347	1	cluster	cluster	NOUN
futech-534	347	2	computing	computing	NOUN
futech-534	347	3	,	,	PUNCT
futech-534	347	4	26(6	26(6	NUM
futech-534	347	5	)	)	PUNCT
futech-534	347	6	,	,	PUNCT
futech-534	347	7	3437	3437	NUM
futech-534	347	8	-	-	SYM
futech-534	347	9	3472	3472	NUM
futech-534	347	10	.	.	PUNCT
futech-534	348	1	https://doi.org/10.1007/s10586-023-04115-6	https://doi.org/10.1007/s10586-023-04115-6	PUNCT
futech-534	349	1	[	[	X
futech-534	349	2	8	8	NUM
futech-534	349	3	]	]	X
futech-534	349	4	umamahesh	umamahesh	PROPN
futech-534	349	5	ritty	ritty	PROPN
futech-534	349	6	,	,	PUNCT
futech-534	349	7	n.	n.	NOUN
futech-534	349	8	,	,	PUNCT
futech-534	349	9	2023	2023	NUM
futech-534	349	10	.	.	PUNCT
futech-534	349	11	predicting	predict	VERB
futech-534	349	12	product	product	NOUN
futech-534	349	13	characteristics	characteristic	NOUN
futech-534	349	14	using	use	VERB
futech-534	349	15	neural	neural	ADJ
futech-534	349	16	networks	network	NOUN
futech-534	349	17	(	(	PUNCT
futech-534	349	18	master	master	NOUN
futech-534	349	19	's	's	PART
futech-534	349	20	thesis	thesis	NOUN
futech-534	349	21	,	,	PUNCT
futech-534	349	22	universityiofitwente	universityiofitwente	PROPN
futech-534	349	23	)	)	PUNCT
futech-534	349	24	.	.	PUNCT
futech-534	350	1	[	[	X
futech-534	350	2	9	9	NUM
futech-534	350	3	]	]	SYM
futech-534	350	4	xu	xu	PROPN
futech-534	350	5	,	,	PUNCT
futech-534	350	6	h.	h.	PROPN
futech-534	350	7	w.	w.	PROPN
futech-534	350	8	,	,	PUNCT
futech-534	350	9	zhang	zhang	PROPN
futech-534	350	10	,	,	PUNCT
futech-534	350	11	q.	q.	PROPN
futech-534	350	12	h.	h.	PROPN
futech-534	350	13	,	,	PUNCT
futech-534	350	14	sun	sun	PROPN
futech-534	350	15	,	,	PUNCT
futech-534	350	16	y.	y.	PROPN
futech-534	350	17	n.	n.	PROPN
futech-534	350	18	,	,	PUNCT
futech-534	350	19	chen	chen	PROPN
futech-534	350	20	,	,	PUNCT
futech-534	350	21	q.	q.	PROPN
futech-534	350	22	l.	l.	PROPN
futech-534	350	23	,	,	PUNCT
futech-534	350	24	qin	qin	PROPN
futech-534	350	25	,	,	PUNCT
futech-534	350	26	w.	w.	PROPN
futech-534	350	27	,	,	PUNCT
futech-534	350	28	lv	lv	PROPN
futech-534	350	29	,	,	PUNCT
futech-534	350	30	y.	y.	PROPN
futech-534	350	31	l.	l.	PROPN
futech-534	350	32	,	,	PUNCT
futech-534	350	33	&	&	CCONJ
futech-534	350	34	zhang	zhang	PROPN
futech-534	350	35	,	,	PUNCT
futech-534	350	36	j.	j.	PROPN
futech-534	350	37	(	(	PUNCT
futech-534	350	38	2024	2024	NUM
futech-534	350	39	)	)	PUNCT
futech-534	350	40	.	.	PUNCT
futech-534	351	1	a	a	DET
futech-534	351	2	fast	fast	ADJ
futech-534	351	3	ramp	ramp	NOUN
futech-534	351	4	-	-	PUNCT
futech-534	351	5	up	up	ADP
futech-534	351	6	framework	framework	NOUN
futech-534	351	7	for	for	ADP
futech-534	351	8	wafer	wafer	NOUN
futech-534	351	9	yield	yield	NOUN
futech-534	351	10	improvement	improvement	NOUN
futech-534	351	11	in	in	ADP
futech-534	351	12	semiconductor	semiconductor	NOUN
futech-534	351	13	manufacturing	manufacturing	NOUN
futech-534	351	14	systems	system	NOUN
futech-534	351	15	.	.	PUNCT
futech-534	352	1	journal	journal	NOUN
futech-534	352	2	of	of	ADP
futech-534	352	3	manufacturing	manufacturing	NOUN
futech-534	352	4	systems	system	NOUN
futech-534	352	5	,	,	PUNCT
futech-534	352	6	76,p222	76,p222	NOUN
futech-534	352	7	-	-	SYM
futech-534	352	8	233	233	NUM
futech-534	352	9	.	.	PUNCT
futech-534	353	1	https://doi.org/10.1016/j.jmsy.2024.07.001	https://doi.org/10.1016/j.jmsy.2024.07.001	NOUN
futech-534	354	1	[	[	X
futech-534	354	2	10	10	NUM
futech-534	354	3	]	]	X
futech-534	354	4	shahroz	shahroz	ADJ
futech-534	354	5	,	,	PUNCT
futech-534	354	6	m.	m.	NOUN
futech-534	354	7	,	,	PUNCT
futech-534	354	8	ali	ali	PROPN
futech-534	354	9	,	,	PUNCT
futech-534	354	10	m.	m.	NOUN
futech-534	354	11	,	,	PUNCT
futech-534	354	12	tahir	tahir	PROPN
futech-534	354	13	,	,	PUNCT
futech-534	354	14	a.	a.	PROPN
futech-534	354	15	,	,	PUNCT
futech-534	354	16	gongora	gongora	PROPN
futech-534	354	17	,	,	PUNCT
futech-534	354	18	h.	h.	PROPN
futech-534	354	19	f.	f.	PROPN
futech-534	354	20	,	,	PUNCT
futech-534	354	21	rios	rios	PROPN
futech-534	354	22	,	,	PUNCT
futech-534	354	23	c.	c.	PROPN
futech-534	354	24	u.	u.	PROPN
futech-534	354	25	,	,	PUNCT
futech-534	354	26	samad	samad	PROPN
futech-534	354	27	,	,	PUNCT
futech-534	354	28	m.	m.	NOUN
futech-534	354	29	a.	a.	PROPN
futech-534	354	30	,	,	PUNCT
futech-534	354	31	&	&	CCONJ
futech-534	354	32	ashraf	ashraf	PROPN
futech-534	354	33	,	,	PUNCT
futech-534	354	34	i.	i.	PROPN
futech-534	354	35	(	(	PUNCT
futech-534	354	36	2024	2024	NUM
futech-534	354	37	)	)	PUNCT
futech-534	354	38	.	.	PUNCT
futech-534	355	1	hierarchical	hierarchical	ADJ
futech-534	355	2	attention	attention	NOUN
futech-534	355	3	module	module	NOUN
futech-534	355	4	-	-	PUNCT
futech-534	355	5	based	base	VERB
futech-534	355	6	hotspot	hotspot	NOUN
futech-534	355	7	detection	detection	NOUN
futech-534	355	8	in	in	ADP
futech-534	355	9	wafer	wafer	NOUN
futech-534	355	10	fabrication	fabrication	NOUN
futech-534	355	11	using	use	VERB
futech-534	355	12	convolutional	convolutional	ADJ
futech-534	355	13	neural	neural	ADJ
futech-534	355	14	network	network	NOUN
futech-534	355	15	model	model	NOUN
futech-534	355	16	.	.	PUNCT
futech-534	356	1	ieeeiaccess	ieeeiaccess	NOUN
futech-534	356	2	.	.	PUNCT
futech-534	357	1	doi	doi	NOUN
futech-534	357	2	:	:	PUNCT
futech-534	357	3	10.1109	10.1109	NUM
futech-534	357	4	/	/	SYM
futech-534	357	5	access.2024.3422616	access.2024.3422616	PRON
futech-534	358	1	[	[	X
futech-534	358	2	11	11	NUM
futech-534	358	3	]	]	X
futech-534	358	4	lee	lee	PROPN
futech-534	358	5	,	,	PUNCT
futech-534	358	6	y.	y.	PROPN
futech-534	358	7	h.	h.	PROPN
futech-534	358	8	,	,	PUNCT
futech-534	358	9	&	&	CCONJ
futech-534	358	10	lee	lee	PROPN
futech-534	358	11	,	,	PUNCT
futech-534	358	12	s.	s.	PROPN
futech-534	358	13	(	(	PUNCT
futech-534	358	14	2022	2022	NUM
futech-534	358	15	)	)	PUNCT
futech-534	358	16	.	.	PUNCT
futech-534	359	1	deep	deep	ADJ
futech-534	359	2	reinforcement	reinforcement	NOUN
futech-534	359	3	learning	learning	NOUN
futech-534	359	4	based	base	VERB
futech-534	359	5	scheduling	scheduling	NOUN
futech-534	359	6	within	within	ADP
futech-534	359	7	production	production	NOUN
futech-534	359	8	plan	plan	NOUN
futech-534	359	9	in	in	ADP
futech-534	359	10	semiconductorpfabrication	semiconductorpfabrication	NOUN
futech-534	359	11	.	.	PUNCT
futech-534	360	1	expertpsystemspwithpapplications	expertpsystemspwithpapplication	NOUN
futech-534	360	2	,	,	PUNCT
futech-534	360	3	191,p116222.https://doi.org/10.1016	191,p116222.https://doi.org/10.1016	NUM
futech-534	360	4	/	/	SYM
futech-534	360	5	j.eswa.2021.11	j.eswa.2021.11	PROPN
futech-534	360	6	6222	6222	NUM
futech-534	360	7	[	[	X
futech-534	360	8	12	12	NUM
futech-534	360	9	]	]	X
futech-534	360	10	adaloudis	adaloudi	NOUN
futech-534	360	11	,	,	PUNCT
futech-534	360	12	m.	m.	NOUN
futech-534	360	13	(	(	PUNCT
futech-534	360	14	2024	2024	NUM
futech-534	360	15	)	)	PUNCT
futech-534	360	16	.	.	PUNCT
futech-534	361	1	remaining	remain	VERB
futech-534	361	2	useful	useful	ADJ
futech-534	361	3	lifetime	lifetime	NOUN
futech-534	361	4	(	(	PUNCT
futech-534	361	5	rul	rul	NOUN
futech-534	361	6	)	)	PUNCT
futech-534	361	7	estimation	estimation	NOUN
futech-534	361	8	for	for	ADP
futech-534	361	9	predictive	predictive	ADJ
futech-534	361	10	maintenance	maintenance	NOUN
futech-534	361	11	in	in	ADP
futech-534	361	12	semiconductorimanufacturing	semiconductorimanufacture	VERB
futech-534	361	13	.	.	PUNCT
futech-534	362	1	[	[	X
futech-534	362	2	13	13	NUM
futech-534	362	3	]	]	PUNCT
futech-534	362	4	espadinha	espadinha	NOUN
futech-534	362	5	-	-	NOUN
futech-534	362	6	cruz	cruz	NOUN
futech-534	362	7	,	,	PUNCT
futech-534	362	8	p.	p.	PROPN
futech-534	362	9	,	,	PUNCT
futech-534	362	10	godina	godina	PROPN
futech-534	362	11	,	,	PUNCT
futech-534	362	12	r.	r.	PROPN
futech-534	362	13	,	,	PUNCT
futech-534	362	14	&	&	CCONJ
futech-534	362	15	rodrigues	rodrigues	PROPN
futech-534	362	16	,	,	PUNCT
futech-534	362	17	e.	e.	PROPN
futech-534	362	18	m.	m.	PROPN
futech-534	362	19	(	(	PUNCT
futech-534	362	20	2021	2021	NUM
futech-534	362	21	)	)	PUNCT
futech-534	362	22	.	.	PUNCT
futech-534	363	1	a	a	DET
futech-534	363	2	review	review	NOUN
futech-534	363	3	of	of	ADP
futech-534	363	4	data	datum	NOUN
futech-534	363	5	mining	mining	NOUN
futech-534	363	6	applications	application	NOUN
futech-534	363	7	in	in	ADP
futech-534	363	8	semiconductor	semiconductor	NOUN
futech-534	363	9	-	-	PUNCT
futech-534	363	10	manufacturing	manufacturing	NOUN
futech-534	363	11	.	.	PUNCT
futech-534	364	1	processes	process	NOUN
futech-534	364	2	,	,	PUNCT
futech-534	364	3	9(2),p305	9(2),p305	NOUN
futech-534	364	4	.	.	PUNCT
futech-534	365	1	https://doi.org/10.3390/pr9020305	https://doi.org/10.3390/pr9020305	X
futech-534	366	1	[	[	X
futech-534	366	2	14	14	NUM
futech-534	366	3	]	]	X
futech-534	366	4	xia	xia	PROPN
futech-534	366	5	,	,	PUNCT
futech-534	366	6	b.	b.	PROPN
futech-534	366	7	,	,	PUNCT
futech-534	366	8	tian	tian	PROPN
futech-534	366	9	,	,	PUNCT
futech-534	366	10	t.	t.	PROPN
futech-534	366	11	,	,	PUNCT
futech-534	366	12	gao	gao	PROPN
futech-534	366	13	,	,	PUNCT
futech-534	366	14	y.	y.	PROPN
futech-534	366	15	,	,	PUNCT
futech-534	366	16	zhang	zhang	PROPN
futech-534	366	17	,	,	PUNCT
futech-534	366	18	m.	m.	NOUN
futech-534	366	19	,	,	PUNCT
futech-534	366	20	&	&	CCONJ
futech-534	366	21	peng	peng	PROPN
futech-534	366	22	,	,	PUNCT
futech-534	366	23	y.	y.	PROPN
futech-534	366	24	(	(	PUNCT
futech-534	366	25	2022	2022	NUM
futech-534	366	26	)	)	PUNCT
futech-534	366	27	.	.	PUNCT
futech-534	367	1	a	a	DET
futech-534	367	2	dynamic	dynamic	ADJ
futech-534	367	3	dispatching	dispatching	NOUN
futech-534	367	4	method	method	NOUN
futech-534	367	5	for	for	ADP
futech-534	367	6	large	large	ADJ
futech-534	367	7	scale	scale	NOUN
futech-534	367	8	interbay	interbay	NOUN
futech-534	367	9	material	material	NOUN
futech-534	367	10	handling	handling	NOUN
futech-534	367	11	systems	system	NOUN
futech-534	367	12	of	of	ADP
futech-534	367	13	semiconductor	semiconductor	NOUN
futech-534	367	14	fab	fab	NOUN
futech-534	367	15	.	.	PUNCT
futech-534	368	1	sustainability	sustainability	NOUN
futech-534	368	2	,	,	PUNCT
futech-534	368	3	14(21	14(21	NUM
futech-534	368	4	)	)	PUNCT
futech-534	368	5	,	,	PUNCT
futech-534	368	6	13882	13882	NUM
futech-534	368	7	.	.	PUNCT
futech-534	369	1	https://doi.org/10.3390/su142113882	https://doi.org/10.3390/su142113882	X
futech-534	370	1	[	[	X
futech-534	370	2	15	15	NUM
futech-534	370	3	]	]	X
futech-534	370	4	yoon	yoon	PROPN
futech-534	370	5	,	,	PUNCT
futech-534	370	6	h.	h.	PROPN
futech-534	370	7	,	,	PUNCT
futech-534	370	8	&	&	CCONJ
futech-534	370	9	kim	kim	PROPN
futech-534	370	10	,	,	PUNCT
futech-534	370	11	h.	h.	PROPN
futech-534	370	12	(	(	PUNCT
futech-534	370	13	2024	2024	NUM
futech-534	370	14	)	)	PUNCT
futech-534	370	15	.	.	PUNCT
futech-534	371	1	few	few	ADJ
futech-534	371	2	-	-	PUNCT
futech-534	371	3	shot	shot	NOUN
futech-534	371	4	classification	classification	NOUN
futech-534	371	5	of	of	ADP
futech-534	371	6	wafer	wafer	NOUN
futech-534	371	7	bin	bin	NOUN
futech-534	371	8	maps	map	NOUN
futech-534	371	9	using	use	VERB
futech-534	371	10	transfer	transfer	NOUN
futech-534	371	11	learning	learning	NOUN
futech-534	371	12	and	and	CCONJ
futech-534	371	13	ensemble	ensemble	ADJ
futech-534	371	14	learning	learning	NOUN
futech-534	371	15	.	.	PUNCT
futech-534	372	1	journal	journal	NOUN
futech-534	372	2	of	of	ADP
futech-534	372	3	manufacturing	manufacturing	NOUN
futech-534	372	4	science	science	NOUN
futech-534	372	5	and	and	CCONJ
futech-534	372	6	engineering	engineering	NOUN
futech-534	372	7	,	,	PUNCT
futech-534	372	8	146	146	NUM
futech-534	372	9	,	,	PUNCT
futech-534	372	10	070903	070903	NUM
futech-534	372	11	-	-	SYM
futech-534	372	12	1	1	NUM
futech-534	372	13	.	.	PUNCT
futech-534	372	14	https://doi.org/10.1115/1.4065255	https://doi.org/10.1115/1.4065255	PROPN
futech-534	373	1	[	[	X
futech-534	373	2	16	16	NUM
futech-534	373	3	]	]	X
futech-534	373	4	jaiswal	jaiswal	PROPN
futech-534	373	5	,	,	PUNCT
futech-534	373	6	r.	r.	PROPN
futech-534	373	7	(	(	PUNCT
futech-534	373	8	2023	2023	NUM
futech-534	373	9	)	)	PUNCT
futech-534	373	10	.	.	PUNCT
futech-534	374	1	machine	machine	NOUN
futech-534	374	2	learning	learning	NOUN
futech-534	374	3	based	base	VERB
futech-534	374	4	prediction	prediction	NOUN
futech-534	374	5	models	model	NOUN
futech-534	374	6	for	for	ADP
futech-534	374	7	silicon	silicon	NOUN
futech-534	374	8	heterojunction	heterojunction	NOUN
futech-534	374	9	solar	solar	ADJ
futech-534	374	10	cell	cell	NOUN
futech-534	374	11	optimization	optimization	NOUN
futech-534	374	12	(	(	PUNCT
futech-534	374	13	doctoral	doctoral	ADJ
futech-534	374	14	dissertation	dissertation	NOUN
futech-534	374	15	,	,	PUNCT
futech-534	374	16	the	the	DET
futech-534	374	17	university	university	NOUN
futech-534	374	18	of	of	ADP
futech-534	374	19	new	new	PROPN
futech-534	374	20	mexico	mexico	PROPN
futech-534	374	21	)	)	PUNCT
futech-534	374	22	.	.	PUNCT
futech-534	375	1	[	[	X
futech-534	375	2	17	17	NUM
futech-534	375	3	]	]	X
futech-534	375	4	doinychko	doinychko	PROPN
futech-534	375	5	,	,	PUNCT
futech-534	375	6	a.	a.	NOUN
futech-534	375	7	(	(	PUNCT
futech-534	375	8	2023	2023	NUM
futech-534	375	9	)	)	PUNCT
futech-534	375	10	.	.	PUNCT
futech-534	376	1	multiview	multiview	NOUN
futech-534	376	2	learning	learn	VERB
futech-534	376	3	with	with	ADP
futech-534	376	4	missing	miss	VERB
futech-534	376	5	views	view	NOUN
futech-534	376	6	and	and	CCONJ
futech-534	376	7	learning	learn	VERB
futech-534	376	8	solutions	solution	NOUN
futech-534	376	9	for	for	ADP
futech-534	376	10	cross	cross	ADJ
futech-534	376	11	-	-	NOUN
futech-534	376	12	process	process	NOUN
futech-534	376	13	modeling	modeling	NOUN
futech-534	376	14	in	in	ADP
futech-534	376	15	semiconductor	semiconductor	NOUN
futech-534	376	16	manufacturing	manufacturing	NOUN
futech-534	376	17	industry	industry	NOUN
futech-534	376	18	(	(	PUNCT
futech-534	376	19	doctoral	doctoral	ADJ
futech-534	376	20	dissertation	dissertation	NOUN
futech-534	376	21	,	,	PUNCT
futech-534	376	22	université	université	PROPN
futech-534	376	23	grenoble	grenoble	PROPN
futech-534	376	24	alpes	alpes	PROPN
futech-534	376	25	.	.	PUNCT
futech-534	377	1	hal	hal	PROPN
futech-534	377	2	i	i	PROPN
futech-534	377	3	d	d	PROPN
futech-534	377	4	:	:	PUNCT
futech-534	377	5	tel-04142555	tel-04142555	NOUN
futech-534	377	6	,	,	PUNCT
futech-534	377	7	version	version	NOUN
futech-534	377	8	2	2	NUM
futech-534	378	1	[	[	SYM
futech-534	378	2	18	18	NUM
futech-534	378	3	]	]	X
futech-534	378	4	piedrafita	piedrafita	X
futech-534	378	5	acin	acin	PROPN
futech-534	378	6	,	,	PUNCT
futech-534	378	7	v.	v.	ADP
futech-534	378	8	m.	m.	NOUN
futech-534	378	9	(	(	PUNCT
futech-534	378	10	2023	2023	NUM
futech-534	378	11	)	)	PUNCT
futech-534	378	12	.	.	PUNCT
futech-534	379	1	forecasting	forecast	VERB
futech-534	379	2	inventory	inventory	NOUN
futech-534	379	3	demand	demand	NOUN
futech-534	379	4	for	for	ADP
futech-534	379	5	a	a	DET
futech-534	379	6	semiconductor	semiconductor	NOUN
futech-534	379	7	manufacturer	manufacturer	NOUN
futech-534	379	8	:	:	PUNCT
futech-534	379	9	a	a	DET
futech-534	379	10	case	case	NOUN
futech-534	379	11	study	study	NOUN
futech-534	379	12	using	use	VERB
futech-534	379	13	machine	machine	NOUN
futech-534	379	14	learning	learning	NOUN
futech-534	379	15	and	and	CCONJ
futech-534	379	16	other	other	ADJ
futech-534	379	17	methods	method	NOUN
futech-534	379	18	ka	ka	PROPN
futech-534	379	19	.	.	PROPN
futech-534	379	20	kumar	kumar	PROPN
futech-534	379	21	&	&	CCONJ
futech-534	379	22	k.	k.	PROPN
futech-534	379	23	hemachandran	hemachandran	PROPN
futech-534	379	24	/	/	SYM
futech-534	379	25	future	future	ADJ
futech-534	379	26	technology	technology	NOUN
futech-534	379	27	february	february	PROPN
futech-534	379	28	2026|	2026|	NUM
futech-534	379	29	volume	volume	NOUN
futech-534	379	30	05	05	NUM
futech-534	380	1	|	|	ADV
futech-534	380	2	issue	issue	NOUN
futech-534	380	3	01	01	NUM
futech-534	381	1	|	|	ADV
futech-534	381	2	pages	page	VERB
futech-534	381	3	55	55	NUM
futech-534	381	4	-	-	SYM
futech-534	381	5	64	64	NUM
futech-534	381	6	64	64	NUM
futech-534	381	7	applied	apply	VERB
futech-534	381	8	to	to	ADP
futech-534	381	9	time	time	NOUN
futech-534	381	10	series	series	PROPN
futech-534	381	11	data	data	PROPN
futech-534	381	12	.	.	PUNCT
futech-534	382	1	https://urn.fi/urn:nbn:fi:amk-2023121737970	https://urn.fi/urn:nbn:fi:amk-2023121737970	PRON
futech-534	382	2	[	[	X
futech-534	382	3	19	19	NUM
futech-534	382	4	]	]	X
futech-534	382	5	chien	chien	PROPN
futech-534	382	6	,	,	PUNCT
futech-534	382	7	c.	c.	PROPN
futech-534	382	8	f.	f.	PROPN
futech-534	382	9	,	,	PUNCT
futech-534	382	10	hung	hung	PROPN
futech-534	382	11	,	,	PUNCT
futech-534	382	12	w.	w.	PROPN
futech-534	382	13	t.	t.	PROPN
futech-534	382	14	,	,	PUNCT
futech-534	382	15	&	&	CCONJ
futech-534	382	16	liao	liao	PROPN
futech-534	382	17	,	,	PUNCT
futech-534	382	18	e.	e.	PROPN
futech-534	382	19	t.	t.	PROPN
futech-534	382	20	y.	y.	PROPN
futech-534	382	21	(	(	PUNCT
futech-534	382	22	2022	2022	NUM
futech-534	382	23	)	)	PUNCT
futech-534	382	24	.	.	PUNCT
futech-534	383	1	redefining	redefine	VERB
futech-534	383	2	monitoring	monitor	VERB
futech-534	383	3	rules	rule	NOUN
futech-534	383	4	for	for	ADP
futech-534	383	5	intelligent	intelligent	ADJ
futech-534	383	6	fault	fault	NOUN
futech-534	383	7	detection	detection	NOUN
futech-534	383	8	and	and	CCONJ
futech-534	383	9	classification	classification	NOUN
futech-534	383	10	via	via	ADP
futech-534	383	11	cnn	cnn	PROPN
futech-534	383	12	transfer	transfer	NOUN
futech-534	383	13	learning	learning	NOUN
futech-534	383	14	for	for	ADP
futech-534	383	15	smart	smart	ADJ
futech-534	383	16	manufacturing	manufacturing	NOUN
futech-534	383	17	.	.	PUNCT
futech-534	384	1	ieee	ieee	NOUN
futech-534	384	2	transactions	transaction	NOUN
futech-534	384	3	on	on	ADP
futech-534	384	4	semiconductor	semiconductor	NOUN
futech-534	384	5	manufacturing	manufacturing	NOUN
futech-534	384	6	,	,	PUNCT
futech-534	384	7	35(2	35(2	NUM
futech-534	384	8	)	)	PUNCT
futech-534	384	9	,	,	PUNCT
futech-534	384	10	158	158	NUM
futech-534	384	11	-	-	SYM
futech-534	384	12	165	165	NUM
futech-534	384	13	.	.	PUNCT
futech-534	385	1	doi	doi	NOUN
futech-534	385	2	:	:	PUNCT
futech-534	385	3	10.1109	10.1109	NUM
futech-534	385	4	/	/	SYM
futech-534	385	5	tsm.2022.3164904	tsm.2022.3164904	NUM
futech-534	385	6	[	[	SYM
futech-534	385	7	20	20	NUM
futech-534	385	8	]	]	SYM
futech-534	385	9	maitra	maitra	NOUN
futech-534	385	10	,	,	PUNCT
futech-534	385	11	v.	v.	PROPN
futech-534	385	12	,	,	PUNCT
futech-534	385	13	su	su	PROPN
futech-534	385	14	,	,	PUNCT
futech-534	385	15	y.	y.	PROPN
futech-534	385	16	,	,	PUNCT
futech-534	385	17	&	&	CCONJ
futech-534	385	18	shi	shi	PROPN
futech-534	385	19	,	,	PUNCT
futech-534	385	20	j.	j.	PROPN
futech-534	385	21	(	(	PUNCT
futech-534	385	22	2024	2024	NUM
futech-534	385	23	)	)	PUNCT
futech-534	385	24	.	.	PUNCT
futech-534	386	1	virtual	virtual	ADJ
futech-534	386	2	metrology	metrology	NOUN
futech-534	386	3	in	in	ADP
futech-534	386	4	semiconductor	semiconductor	NOUN
futech-534	386	5	manufacturing	manufacturing	NOUN
futech-534	386	6	:	:	PUNCT
futech-534	386	7	current	current	ADJ
futech-534	386	8	status	status	NOUN
futech-534	386	9	and	and	CCONJ
futech-534	386	10	future	future	ADJ
futech-534	386	11	prospects	prospect	NOUN
futech-534	386	12	.	.	PUNCT
futech-534	387	1	expert	expert	NOUN
futech-534	387	2	systems	system	NOUN
futech-534	387	3	with	with	ADP
futech-534	387	4	applications	application	NOUN
futech-534	387	5	,	,	PUNCT
futech-534	387	6	123559	123559	NUM
futech-534	387	7	.	.	PUNCT
futech-534	388	1	https://doi.org/10.1016/j.eswa.2024.123559	https://doi.org/10.1016/j.eswa.2024.123559	PROPN
futech-534	388	2	[	[	X
futech-534	388	3	21	21	NUM
futech-534	388	4	]	]	X
futech-534	388	5	yang	yang	PROPN
futech-534	388	6	,	,	PUNCT
futech-534	388	7	y.	y.	PROPN
futech-534	388	8	,	,	PUNCT
futech-534	388	9	bom	bom	PROPN
futech-534	388	10	,	,	PUNCT
futech-534	388	11	s.	s.	PROPN
futech-534	388	12	,	,	PUNCT
futech-534	388	13	&	&	CCONJ
futech-534	388	14	shen	shen	PROPN
futech-534	388	15	,	,	PUNCT
futech-534	388	16	x.	x.	PROPN
futech-534	388	17	(	(	PUNCT
futech-534	388	18	2024	2024	NUM
futech-534	388	19	)	)	PUNCT
futech-534	388	20	.	.	PUNCT
futech-534	389	1	a	a	DET
futech-534	389	2	hierarchical	hierarchical	ADJ
futech-534	389	3	ensemble	ensemble	ADJ
futech-534	389	4	causal	causal	ADJ
futech-534	389	5	structure	structure	NOUN
futech-534	389	6	learning	learn	VERB
futech-534	389	7	approach	approach	NOUN
futech-534	389	8	for	for	ADP
futech-534	389	9	wafer	wafer	NOUN
futech-534	389	10	manufacturing	manufacturing	NOUN
futech-534	389	11	.	.	PUNCT
futech-534	390	1	journal	journal	NOUN
futech-534	390	2	of	of	ADP
futech-534	390	3	intelligent	intelligent	ADJ
futech-534	390	4	manufacturing	manufacturing	NOUN
futech-534	390	5	,	,	PUNCT
futech-534	390	6	35(6	35(6	NUM
futech-534	390	7	)	)	PUNCT
futech-534	390	8	,	,	PUNCT
futech-534	390	9	2961	2961	NUM
futech-534	390	10	-	-	SYM
futech-534	390	11	2978	2978	NUM
futech-534	390	12	.	.	PUNCT
futech-534	391	1	https://doi.org/10.1007/s10845023-02188-z	https://doi.org/10.1007/s10845023-02188-z	PUNCT
futech-534	392	1	[	[	X
futech-534	392	2	22	22	NUM
futech-534	392	3	]	]	PUNCT
futech-534	392	4	bardossy	bardossy	PROPN
futech-534	392	5	,	,	PUNCT
futech-534	392	6	a.	a.	PROPN
futech-534	392	7	,	,	PUNCT
futech-534	392	8	&	&	CCONJ
futech-534	392	9	duckstein	duckstein	PROPN
futech-534	392	10	,	,	PUNCT
futech-534	392	11	l.	l.	PROPN
futech-534	392	12	(	(	PUNCT
futech-534	392	13	2022	2022	NUM
futech-534	392	14	)	)	PUNCT
futech-534	392	15	.	.	PUNCT
futech-534	393	1	fuzzy	fuzzy	ADJ
futech-534	393	2	rule	rule	NOUN
futech-534	393	3	-	-	PUNCT
futech-534	393	4	based	base	VERB
futech-534	393	5	modeling	modeling	NOUN
futech-534	393	6	with	with	ADP
futech-534	393	7	applications	application	NOUN
futech-534	393	8	to	to	ADP
futech-534	393	9	geophysical	geophysical	ADJ
futech-534	393	10	,	,	PUNCT
futech-534	393	11	biological	biological	ADJ
futech-534	393	12	,	,	PUNCT
futech-534	393	13	pandpengineeringpsystemspcrcppress	pandpengineeringpsystemspcrcppress	NOUN
futech-534	393	14	.	.	PUNCT
futech-534	394	1	https://doi.org/10.1201/9780138755133	https://doi.org/10.1201/9780138755133	PUNCT
futech-534	395	1	[	[	X
futech-534	395	2	23	23	NUM
futech-534	395	3	]	]	X
futech-534	395	4	wang	wang	PROPN
futech-534	395	5	,	,	PUNCT
futech-534	395	6	y.	y.	PROPN
futech-534	395	7	c.	c.	PROPN
futech-534	395	8	,	,	PUNCT
futech-534	395	9	chen	chen	PROPN
futech-534	395	10	,	,	PUNCT
futech-534	395	11	t.	t.	PROPN
futech-534	395	12	,	,	PUNCT
futech-534	395	13	&	&	CCONJ
futech-534	395	14	hsu	hsu	PROPN
futech-534	395	15	,	,	PUNCT
futech-534	395	16	t.	t.	PROPN
futech-534	395	17	c.	c.	PROPN
futech-534	395	18	(	(	PUNCT
futech-534	395	19	2021	2021	NUM
futech-534	395	20	)	)	PUNCT
futech-534	395	21	.	.	PUNCT
futech-534	396	1	a	a	DET
futech-534	396	2	fuzzy	fuzzy	ADJ
futech-534	396	3	deep	deep	ADJ
futech-534	396	4	predictive	predictive	ADJ
futech-534	396	5	analytics	analytic	NOUN
futech-534	396	6	approach	approach	NOUN
futech-534	396	7	for	for	ADP
futech-534	396	8	enhancing	enhance	VERB
futech-534	396	9	cycle	cycle	NOUN
futech-534	396	10	time	time	NOUN
futech-534	396	11	range	range	NOUN
futech-534	396	12	estimation	estimation	NOUN
futech-534	396	13	precision	precision	NOUN
futech-534	396	14	in	in	ADP
futech-534	396	15	wafer	wafer	NOUN
futech-534	396	16	fabrication	fabrication	NOUN
futech-534	396	17	.	.	PUNCT
futech-534	397	1	decision	decision	NOUN
futech-534	397	2	analytics	analytic	NOUN
futech-534	397	3	journal	journal	NOUN
futech-534	397	4	,	,	PUNCT
futech-534	397	5	1	1	NUM
futech-534	397	6	,	,	PUNCT
futech-534	397	7	100010	100010	NUM
futech-534	397	8	.	.	PUNCT
futech-534	398	1	https://doi.org/10.1016/j.dajour.2021.100010	https://doi.org/10.1016/j.dajour.2021.100010	PROPN
futech-534	398	2	[	[	X
futech-534	398	3	24	24	NUM
futech-534	398	4	]	]	PUNCT
futech-534	398	5	alizadeh	alizadeh	NOUN
futech-534	398	6	,	,	PUNCT
futech-534	398	7	m.	m.	NOUN
futech-534	398	8	,	,	PUNCT
futech-534	398	9	&	&	CCONJ
futech-534	398	10	ma	ma	PROPN
futech-534	398	11	,	,	PUNCT
futech-534	398	12	j.	j.	PROPN
futech-534	398	13	(	(	PUNCT
futech-534	398	14	2021	2021	NUM
futech-534	398	15	)	)	PUNCT
futech-534	398	16	.	.	PUNCT
futech-534	399	1	a	a	DET
futech-534	399	2	comparative	comparative	ADJ
futech-534	399	3	study	study	NOUN
futech-534	399	4	of	of	ADP
futech-534	399	5	series	series	NOUN
futech-534	399	6	hybrid	hybrid	ADJ
futech-534	399	7	approaches	approach	NOUN
futech-534	399	8	to	to	PART
futech-534	399	9	model	model	VERB
futech-534	399	10	and	and	CCONJ
futech-534	399	11	predict	predict	VERB
futech-534	399	12	the	the	DET
futech-534	399	13	vehiclepoperatingpstates	vehiclepoperatingpstate	NOUN
futech-534	399	14	.	.	PUNCT
futech-534	400	1	computersp&pindustrialpengineering	computersp&pindustrialpengineere	VERB
futech-534	400	2	,	,	PUNCT
futech-534	400	3	162,p107770	162,p107770	NUM
futech-534	400	4	.	.	PUNCT
futech-534	400	5	https://doi.org/10.1016/j.cie.2021.107770	https://doi.org/10.1016/j.cie.2021.107770	PUNCT
futech-534	401	1	[	[	X
futech-534	401	2	25	25	NUM
futech-534	401	3	]	]	PUNCT
futech-534	401	4	patel	patel	NOUN
futech-534	401	5	,	,	PUNCT
futech-534	401	6	t.	t.	PROPN
futech-534	401	7	,	,	PUNCT
futech-534	401	8	murugan	murugan	PROPN
futech-534	401	9	,	,	PUNCT
futech-534	401	10	r.	r.	PROPN
futech-534	401	11	,	,	PUNCT
futech-534	401	12	yenduri	yenduri	PROPN
futech-534	401	13	,	,	PUNCT
futech-534	401	14	g.	g.	PROPN
futech-534	401	15	,	,	PUNCT
futech-534	401	16	jhaveri	jhaveri	PROPN
futech-534	401	17	,	,	PUNCT
futech-534	401	18	r.	r.	PROPN
futech-534	401	19	,	,	PUNCT
futech-534	401	20	snoussi	snoussi	PROPN
futech-534	401	21	,	,	PUNCT
futech-534	401	22	h.	h.	PROPN
futech-534	401	23	,	,	PUNCT
futech-534	401	24	&	&	CCONJ
futech-534	401	25	gaber	gaber	PROPN
futech-534	401	26	,	,	PUNCT
futech-534	401	27	t.	t.	PROPN
futech-534	401	28	(	(	PUNCT
futech-534	401	29	2024	2024	NUM
futech-534	401	30	)	)	PUNCT
futech-534	401	31	.	.	PUNCT
futech-534	402	1	demystifying	demystify	VERB
futech-534	402	2	defects	defect	NOUN
futech-534	402	3	:	:	PUNCT
futech-534	402	4	federated	federated	ADJ
futech-534	402	5	learning	learning	NOUN
futech-534	402	6	and	and	CCONJ
futech-534	402	7	explainable	explainable	ADJ
futech-534	402	8	ai	ai	VERB
futech-534	402	9	for	for	ADP
futech-534	402	10	semiconductor	semiconductor	NOUN
futech-534	402	11	fault	fault	NOUN
futech-534	402	12	detection	detection	NOUN
futech-534	402	13	.	.	PUNCT
futech-534	403	1	ieee	ieee	NOUN
futech-534	403	2	access	access	NOUN
futech-534	403	3	.	.	PUNCT
futech-534	404	1	doi	doi	NOUN
futech-534	404	2	:	:	PUNCT
futech-534	404	3	10.1109	10.1109	NUM
futech-534	404	4	/	/	SYM
futech-534	404	5	access.2024.3425226	access.2024.3425226	NOUN
futech-534	405	1	[	[	X
futech-534	405	2	26	26	NUM
futech-534	405	3	]	]	X
futech-534	405	4	tin	tin	NOUN
futech-534	405	5	,	,	PUNCT
futech-534	405	6	t.	t.	PROPN
futech-534	405	7	c.	c.	PROPN
futech-534	405	8	,	,	PUNCT
futech-534	405	9	tan	tan	PROPN
futech-534	405	10	,	,	PUNCT
futech-534	405	11	s.	s.	PROPN
futech-534	405	12	c.	c.	PROPN
futech-534	405	13	,	,	PUNCT
futech-534	405	14	&	&	CCONJ
futech-534	405	15	lee	lee	PROPN
futech-534	405	16	,	,	PUNCT
futech-534	405	17	c.	c.	PROPN
futech-534	405	18	k.	k.	PROPN
futech-534	405	19	(	(	PUNCT
futech-534	405	20	2022	2022	NUM
futech-534	405	21	)	)	PUNCT
futech-534	405	22	.	.	PUNCT
futech-534	406	1	virtual	virtual	ADJ
futech-534	406	2	metrology	metrology	NOUN
futech-534	406	3	in	in	ADP
futech-534	406	4	semiconductor	semiconductor	NOUN
futech-534	406	5	fabrication	fabrication	NOUN
futech-534	406	6	foundry	foundry	NOUN
futech-534	406	7	using	use	VERB
futech-534	406	8	deepplearningpneuralpnetworks.pieeepaccess	deepplearningpneuralpnetworks.pieeepaccess	PROPN
futech-534	406	9	,	,	PUNCT
futech-534	406	10	p10,p	p10,p	NOUN
futech-534	406	11	81960	81960	NUM
futech-534	406	12	-	-	PUNCT
futech-534	406	13	81973	81973	NUM
futech-534	406	14	.	.	PUNCT
futech-534	407	1	doi	doi	NOUN
futech-534	407	2	:	:	PUNCT
futech-534	407	3	10.1109	10.1109	NUM
futech-534	407	4	/	/	SYM
futech-534	407	5	access.2022.3193783	access.2022.3193783	NOUN
futech-534	407	6	[	[	X
futech-534	407	7	27	27	NUM
futech-534	407	8	]	]	X
futech-534	407	9	lee	lee	PROPN
futech-534	407	10	,	,	PUNCT
futech-534	407	11	g.	g.	PROPN
futech-534	407	12	m.	m.	PROPN
futech-534	407	13	,	,	PUNCT
futech-534	407	14	&	&	CCONJ
futech-534	407	15	gao	gao	PROPN
futech-534	407	16	,	,	PUNCT
futech-534	407	17	x.	x.	NOUN
futech-534	407	18	(	(	PUNCT
futech-534	407	19	2021	2021	NUM
futech-534	407	20	)	)	PUNCT
futech-534	407	21	.	.	PUNCT
futech-534	408	1	a	a	DET
futech-534	408	2	hybrid	hybrid	ADJ
futech-534	408	3	approach	approach	NOUN
futech-534	408	4	combining	combine	VERB
futech-534	408	5	fuzzy	fuzzy	ADJ
futech-534	408	6	c	c	PROPN
futech-534	408	7	means	mean	VERB
futech-534	408	8	based	base	VERB
futech-534	408	9	genetic	genetic	ADJ
futech-534	408	10	algorithm	algorithm	NOUN
futech-534	408	11	and	and	CCONJ
futech-534	408	12	machine	machine	NOUN
futech-534	408	13	learning	learn	VERB
futech-534	408	14	for	for	ADP
futech-534	408	15	predicting	predict	VERB
futech-534	408	16	job	job	NOUN
futech-534	408	17	cycle	cycle	NOUN
futech-534	408	18	times	time	NOUN
futech-534	408	19	for	for	ADP
futech-534	408	20	semiconductor	semiconductor	NOUN
futech-534	408	21	manufacturing	manufacturing	NOUN
futech-534	408	22	.	.	PUNCT
futech-534	409	1	applied	apply	VERB
futech-534	409	2	sciences	science	NOUN
futech-534	409	3	,	,	PUNCT
futech-534	409	4	11(16	11(16	NUM
futech-534	409	5	)	)	PUNCT
futech-534	409	6	,	,	PUNCT
futech-534	409	7	7428	7428	NUM
futech-534	409	8	.	.	PUNCT
futech-534	410	1	https://doi.org/10.3390/app11167428	https://doi.org/10.3390/app11167428	PROPN
futech-534	410	2	[	[	X
futech-534	410	3	28	28	NUM
futech-534	410	4	]	]	X
futech-534	410	5	wang	wang	PROPN
futech-534	410	6	,	,	PUNCT
futech-534	410	7	j.	j.	PROPN
futech-534	410	8	,	,	PUNCT
futech-534	410	9	gao	gao	PROPN
futech-534	410	10	,	,	PUNCT
futech-534	410	11	p.	p.	PROPN
futech-534	410	12	,	,	PUNCT
futech-534	410	13	li	li	PROPN
futech-534	410	14	,	,	PUNCT
futech-534	410	15	z.	z.	PROPN
futech-534	410	16	,	,	PUNCT
futech-534	410	17	&	&	CCONJ
futech-534	410	18	bai	bai	PROPN
futech-534	410	19	,	,	PUNCT
futech-534	410	20	w.	w.	PROPN
futech-534	410	21	(	(	PUNCT
futech-534	410	22	2021	2021	NUM
futech-534	410	23	)	)	PUNCT
futech-534	410	24	.	.	PUNCT
futech-534	411	1	hierarchical	hierarchical	ADJ
futech-534	411	2	transfer	transfer	NOUN
futech-534	411	3	learning	learn	VERB
futech-534	411	4	for	for	ADP
futech-534	411	5	cycle	cycle	NOUN
futech-534	411	6	time	time	NOUN
futech-534	411	7	forecasting	forecasting	NOUN
futech-534	411	8	for	for	ADP
futech-534	411	9	semiconductor	semiconductor	NOUN
futech-534	411	10	wafer	wafer	NOUN
futech-534	411	11	lot	lot	NOUN
futech-534	411	12	under	under	ADP
futech-534	411	13	different	different	ADJ
futech-534	411	14	work	work	NOUN
futech-534	411	15	in	in	ADP
futech-534	411	16	process	process	NOUN
futech-534	411	17	levels	level	NOUN
futech-534	411	18	.	.	PUNCT
futech-534	412	1	mathematics	mathematic	NOUN
futech-534	412	2	,	,	PUNCT
futech-534	412	3	9(17	9(17	NUM
futech-534	412	4	)	)	PUNCT
futech-534	412	5	,	,	PUNCT
futech-534	412	6	2039	2039	NUM
futech-534	412	7	.	.	PUNCT
futech-534	413	1	https://doi.org/10.3390/math9172039	https://doi.org/10.3390/math9172039	NOUN
futech-534	413	2	[	[	X
futech-534	413	3	29	29	NUM
futech-534	413	4	]	]	SYM
futech-534	413	5	schelthoff	schelthoff	NOUN
futech-534	413	6	,	,	PUNCT
futech-534	413	7	k.	k.	PROPN
futech-534	413	8	,	,	PUNCT
futech-534	413	9	jacobi	jacobi	PROPN
futech-534	413	10	,	,	PUNCT
futech-534	413	11	c.	c.	PROPN
futech-534	413	12	,	,	PUNCT
futech-534	413	13	schlosser	schlosser	PROPN
futech-534	413	14	,	,	PUNCT
futech-534	413	15	e.	e.	PROPN
futech-534	413	16	,	,	PUNCT
futech-534	413	17	plohmann	plohmann	PROPN
futech-534	413	18	,	,	PUNCT
futech-534	413	19	d.	d.	PROPN
futech-534	413	20	,	,	PUNCT
futech-534	413	21	janus	janus	PROPN
futech-534	413	22	,	,	PUNCT
futech-534	413	23	m.	m.	NOUN
futech-534	413	24	,	,	PUNCT
futech-534	413	25	&	&	CCONJ
futech-534	413	26	furmans	furmans	PROPN
futech-534	413	27	,	,	PUNCT
futech-534	413	28	k.	k.	PROPN
futech-534	413	29	(	(	PUNCT
futech-534	413	30	2022	2022	NUM
futech-534	413	31	)	)	PUNCT
futech-534	413	32	.	.	PUNCT
futech-534	414	1	feature	feature	NOUN
futech-534	414	2	selection	selection	NOUN
futech-534	414	3	for	for	ADP
futech-534	414	4	waiting	wait	VERB
futech-534	414	5	time	time	NOUN
futech-534	414	6	predictions	prediction	NOUN
futech-534	414	7	in	in	ADP
futech-534	414	8	semiconductor	semiconductor	NOUN
futech-534	414	9	wafer	wafer	NOUN
futech-534	414	10	fabs	fab	NOUN
futech-534	414	11	.	.	PUNCT
futech-534	415	1	ieee	ieee	NOUN
futech-534	415	2	transactions	transaction	NOUN
futech-534	415	3	on	on	ADP
futech-534	415	4	semiconductor	semiconductor	NOUN
futech-534	415	5	manufacturing	manufacturing	NOUN
futech-534	415	6	,	,	PUNCT
futech-534	415	7	35(3),546	35(3),546	NUM
futech-534	415	8	-	-	SYM
futech-534	415	9	555	555	NUM
futech-534	415	10	.	.	PUNCT
futech-534	416	1	doi	doi	NOUN
futech-534	416	2	:	:	PUNCT
futech-534	416	3	10.1109	10.1109	NUM
futech-534	416	4	/	/	SYM
futech-534	416	5	tsm.2022.3182855	tsm.2022.3182855	X
futech-534	417	1	[	[	X
futech-534	417	2	30	30	NUM
futech-534	417	3	]	]	X
futech-534	417	4	tchatchoua	tchatchoua	ADV
futech-534	417	5	,	,	PUNCT
futech-534	417	6	p.	p.	PROPN
futech-534	417	7	,	,	PUNCT
futech-534	417	8	graton	graton	PROPN
futech-534	417	9	,	,	PUNCT
futech-534	417	10	g.	g.	PROPN
futech-534	417	11	,	,	PUNCT
futech-534	417	12	ouladsine	ouladsine	PROPN
futech-534	417	13	,	,	PUNCT
futech-534	417	14	m.	m.	NOUN
futech-534	417	15	,	,	PUNCT
futech-534	417	16	&	&	CCONJ
futech-534	417	17	christaud	christaud	PROPN
futech-534	417	18	,	,	PUNCT
futech-534	417	19	j.	j.	PROPN
futech-534	417	20	f.	f.	PROPN
futech-534	417	21	(	(	PUNCT
futech-534	417	22	2023	2023	NUM
futech-534	417	23	)	)	PUNCT
futech-534	417	24	.	.	PUNCT
futech-534	418	1	application	application	NOUN
futech-534	418	2	of	of	ADP
futech-534	418	3	1d	1d	NUM
futech-534	418	4	resnet	resnet	NOUN
futech-534	418	5	for	for	ADP
futech-534	418	6	multivariate	multivariate	NOUN
futech-534	418	7	fault	fault	NOUN
futech-534	418	8	detection	detection	NOUN
futech-534	418	9	on	on	ADP
futech-534	418	10	semiconductor	semiconductor	NOUN
futech-534	418	11	manufacturing	manufacturing	NOUN
futech-534	418	12	equipment	equipment	NOUN
futech-534	418	13	.	.	PUNCT
futech-534	419	1	sensors	sensor	NOUN
futech-534	419	2	,	,	PUNCT
futech-534	419	3	23(22	23(22	PROPN
futech-534	419	4	)	)	PUNCT
futech-534	419	5	,	,	PUNCT
futech-534	419	6	9099	9099	NUM
futech-534	419	7	.	.	PUNCT
futech-534	420	1	https://doi.org/10.3390/s23229099	https://doi.org/10.3390/s23229099	NUM
futech-534	420	2	this	this	DET
futech-534	420	3	article	article	NOUN
futech-534	420	4	is	be	AUX
futech-534	420	5	an	an	DET
futech-534	420	6	open	open	ADJ
futech-534	420	7	-	-	PUNCT
futech-534	420	8	access	access	NOUN
futech-534	420	9	article	article	NOUN
futech-534	420	10	distributed	distribute	VERB
futech-534	420	11	under	under	ADP
futech-534	420	12	the	the	DET
futech-534	420	13	terms	term	NOUN
futech-534	420	14	and	and	CCONJ
futech-534	420	15	conditions	condition	NOUN
futech-534	420	16	of	of	ADP
futech-534	420	17	the	the	DET
futech-534	420	18	creative	creative	ADJ
futech-534	420	19	commons	common	NOUN
futech-534	420	20	attribution	attribution	NOUN
futech-534	420	21	(	(	PUNCT
futech-534	420	22	cc	cc	NOUN
futech-534	420	23	by	by	ADP
futech-534	420	24	)	)	PUNCT
futech-534	420	25	license	license	NOUN
futech-534	420	26	(	(	PUNCT
futech-534	420	27	https://creativecommons.org/licenses/by/4.0/	https://creativecommons.org/licenses/by/4.0/	PROPN
futech-534	420	28	)	)	PUNCT
futech-534	420	29	.	.	PUNCT
futech-534	421	1	https://creativecommons.org/licenses/by/4.0/	https://creativecommons.org/licenses/by/4.0/	PROPN