id	sid	tid	token	lemma	pos
iajs-512	1	1	1a@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@úó‘ój	1a@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@úó‘ój	PROPN
iajs-512	1	2	�	�	PROPN
iajs-512	1	3	n€a@î@úœäñ€a@‚ï‹»‹€@·ró	n€a@î@úœäñ€a@‚ï‹»‹€@·ró	NUM
iajs-512	1	4	:	:	PUNCT
iajs-512	1	5	a@âig@ú‹	a@âig@ú‹	PROPN
iajs-512	1	6	©	©	PROPN
iajs-512	1	7	@ü‹26@@öü»€a@i1@‚b«@h2013	@ü‹26@@öü»€a@i1@‚b«@h2013	PROPN
iajs-512	1	8	ibn	ibn	PROPN
iajs-512	1	9	al	al	PROPN
iajs-512	1	10	-	-	PUNCT
iajs-512	1	11	haitham	haitham	PROPN
iajs-512	1	12	jour	jour	X
iajs-512	1	13	.	.	PROPN
iajs-512	1	14	for	for	ADP
iajs-512	1	15	pure	pure	ADJ
iajs-512	1	16	&	&	CCONJ
iajs-512	1	17	appl	appl	PROPN
iajs-512	1	18	.	.	PUNCT
iajs-512	2	1	sci	sci	PROPN
iajs-512	2	2	.	.	PUNCT
iajs-512	2	3	vol	vol	NOUN
iajs-512	2	4	.	.	PROPN
iajs-512	3	1	26	26	NUM
iajs-512	3	2	(	(	PUNCT
iajs-512	3	3	1	1	NUM
iajs-512	3	4	)	)	PUNCT
iajs-512	3	5	2013	2013	NUM
iajs-512	3	6	a	a	DET
iajs-512	3	7	study	study	NOUN
iajs-512	3	8	of	of	ADP
iajs-512	3	9	structure	structure	NOUN
iajs-512	3	10	and	and	CCONJ
iajs-512	3	11	optical	optical	ADJ
iajs-512	3	12	properties	property	NOUN
iajs-512	3	13	of	of	ADP
iajs-512	3	14	zno	zno	NOUN
iajs-512	3	15	thin	thin	PROPN
iajs-512	3	16	films	film	NOUN
iajs-512	3	17	deposited	deposit	VERB
iajs-512	3	18	by	by	ADP
iajs-512	3	19	using	use	VERB
iajs-512	3	20	thermal	thermal	ADJ
iajs-512	3	21	evaporation	evaporation	NOUN
iajs-512	3	22	technique	technique	NOUN
iajs-512	3	23	under	under	ADP
iajs-512	3	24	different	different	ADJ
iajs-512	3	25	flow	flow	NOUN
iajs-512	3	26	rate	rate	NOUN
iajs-512	3	27	of	of	ADP
iajs-512	3	28	oxygen	oxygen	NOUN
iajs-512	3	29	o2	o2	PROPN
iajs-512	3	30	samir	samir	PROPN
iajs-512	3	31	a.	a.	PROPN
iajs-512	3	32	maki	maki	PROPN
iajs-512	3	33	alli	alli	PROPN
iajs-512	3	34	a.	a.	PROPN
iajs-512	3	35	shehaband	shehaband	PROPN
iajs-512	3	36	enase	enase	PROPN
iajs-512	3	37	y.	y.	PROPN
iajs-512	3	38	abed	abed	PROPN
iajs-512	3	39	dept	dept	PROPN
iajs-512	3	40	.	.	PROPN
iajs-512	3	41	of	of	ADP
iajs-512	3	42	physics	physics	PROPN
iajs-512	3	43	/	/	SYM
iajs-512	3	44	college	college	NOUN
iajs-512	3	45	of	of	ADP
iajs-512	3	46	education	education	NOUN
iajs-512	3	47	for	for	ADP
iajs-512	3	48	pure	pure	ADJ
iajs-512	3	49	science(ibn	science(ibn	PROPN
iajs-512	3	50	al	al	PROPN
iajs-512	3	51	-	-	PUNCT
iajs-512	3	52	haitham	haitham	PROPN
iajs-512	3	53	)	)	PUNCT
iajs-512	3	54	/	/	SYM
iajs-512	3	55	university	university	NOUN
iajs-512	3	56	of	of	ADP
iajs-512	3	57	baghdad	baghdad	PROPN
iajs-512	3	58	received	receive	VERB
iajs-512	3	59	in:28	in:28	PROPN
iajs-512	3	60	february	february	PROPN
iajs-512	3	61	2012	2012	NUM
iajs-512	3	62	,	,	PUNCT
iajs-512	3	63	accepted	accept	VERB
iajs-512	3	64	in:22	in:22	PROPN
iajs-512	3	65	april	april	PROPN
iajs-512	3	66	2012	2012	NUM
iajs-512	3	67	abstract	abstract	ADJ
iajs-512	3	68	zinc	zinc	NOUN
iajs-512	3	69	oxide	oxide	NOUN
iajs-512	3	70	(	(	PUNCT
iajs-512	3	71	zno	zno	NOUN
iajs-512	3	72	)	)	PUNCT
iajs-512	3	73	transparent	transparent	ADJ
iajs-512	3	74	thin	thin	ADJ
iajs-512	3	75	films	film	NOUN
iajs-512	3	76	with	with	ADP
iajs-512	3	77	different	different	ADJ
iajs-512	3	78	oxygen	oxygen	NOUN
iajs-512	3	79	flow	flow	NOUN
iajs-512	3	80	rates	rate	NOUN
iajs-512	3	81	(	(	PUNCT
iajs-512	3	82	0.5	0.5	NUM
iajs-512	3	83	,	,	PUNCT
iajs-512	3	84	1.0	1.0	NUM
iajs-512	3	85	,	,	PUNCT
iajs-512	3	86	and	and	CCONJ
iajs-512	3	87	1.5)litter	1.5)litter	NUM
iajs-512	3	88	/	/	SYM
iajs-512	3	89	min	min	NOUN
iajs-512	3	90	.	.	PROPN
iajs-512	3	91	were	be	AUX
iajs-512	3	92	prepared	prepare	VERB
iajs-512	3	93	by	by	ADP
iajs-512	3	94	thermal	thermal	ADJ
iajs-512	3	95	evaporation	evaporation	NOUN
iajs-512	3	96	technique	technique	NOUN
iajs-512	3	97	on	on	ADP
iajs-512	3	98	glass	glass	NOUN
iajs-512	3	99	substrate	substrate	NOUN
iajs-512	3	100	at	at	ADP
iajs-512	3	101	a	a	DET
iajs-512	3	102	temperature	temperature	NOUN
iajs-512	3	103	of	of	ADP
iajs-512	3	104	200	200	NUM
iajs-512	3	105	℃	℃	PROPN
iajs-512	3	106	with	with	ADP
iajs-512	3	107	rate	rate	NOUN
iajs-512	3	108	(	(	PUNCT
iajs-512	3	109	10±2)nm	10±2)nm	PROPN
iajs-512	3	110	sec-1	sec-1	NOUN
iajs-512	3	111	,	,	PUNCT
iajs-512	3	112	the	the	DET
iajs-512	3	113	crystallinity	crystallinity	NOUN
iajs-512	3	114	and	and	CCONJ
iajs-512	3	115	structure	structure	NOUN
iajs-512	3	116	of	of	ADP
iajs-512	3	117	these	these	DET
iajs-512	3	118	films	film	NOUN
iajs-512	3	119	were	be	AUX
iajs-512	3	120	analyzed	analyze	VERB
iajs-512	3	121	by	by	ADP
iajs-512	3	122	x	x	NOUN
iajs-512	3	123	-	-	NOUN
iajs-512	3	124	ray	ray	NOUN
iajs-512	3	125	diffraction	diffraction	NOUN
iajs-512	3	126	(	(	PUNCT
iajs-512	3	127	xrd	xrd	NOUN
iajs-512	3	128	)	)	PUNCT
iajs-512	3	129	.	.	PUNCT
iajs-512	4	1	it	it	PRON
iajs-512	4	2	exhibits	exhibit	VERB
iajs-512	4	3	a	a	DET
iajs-512	4	4	polycrystalline	polycrystalline	ADJ
iajs-512	4	5	hexagonal	hexagonal	ADJ
iajs-512	4	6	wurtzite	wurtzite	ADJ
iajs-512	4	7	structure	structure	NOUN
iajs-512	4	8	and	and	CCONJ
iajs-512	4	9	the	the	DET
iajs-512	4	10	preferred	preferred	ADJ
iajs-512	4	11	orientation	orientation	NOUN
iajs-512	4	12	along	along	ADP
iajs-512	4	13	(	(	PUNCT
iajs-512	4	14	002	002	NUM
iajs-512	4	15	)	)	PUNCT
iajs-512	4	16	plane	plane	NOUN
iajs-512	4	17	.	.	PUNCT
iajs-512	5	1	the	the	DET
iajs-512	5	2	optical	optical	ADJ
iajs-512	5	3	properties	property	NOUN
iajs-512	5	4	of	of	ADP
iajs-512	5	5	zno	zno	NOUN
iajs-512	5	6	were	be	AUX
iajs-512	5	7	determined	determine	VERB
iajs-512	5	8	through	through	ADP
iajs-512	5	9	the	the	DET
iajs-512	5	10	optical	optical	ADJ
iajs-512	5	11	transmission	transmission	NOUN
iajs-512	5	12	method	method	NOUN
iajs-512	5	13	using	use	VERB
iajs-512	5	14	ulta	ulta	ADJ
iajs-512	5	15	violet	violet	NOUN
iajs-512	5	16	–	–	PUNCT
iajs-512	5	17	visible	visible	ADJ
iajs-512	5	18	spectrophotometer	spectrophotometer	NOUN
iajs-512	5	19	with	with	ADP
iajs-512	5	20	in	in	ADP
iajs-512	5	21	wave	wave	NOUN
iajs-512	5	22	length	length	NOUN
iajs-512	5	23	(	(	PUNCT
iajs-512	5	24	300	300	NUM
iajs-512	5	25	-	-	SYM
iajs-512	5	26	1100)nm	1100)nm	NUM
iajs-512	5	27	.	.	PUNCT
iajs-512	6	1	the	the	DET
iajs-512	6	2	optical	optical	ADJ
iajs-512	6	3	transmittance	transmittance	NOUN
iajs-512	6	4	of	of	ADP
iajs-512	6	5	the	the	DET
iajs-512	6	6	zno	zno	NOUN
iajs-512	6	7	films	film	NOUN
iajs-512	6	8	increases	increase	VERB
iajs-512	6	9	from	from	ADP
iajs-512	6	10	75	75	NUM
iajs-512	6	11	%	%	NOUN
iajs-512	6	12	to	to	PART
iajs-512	6	13	85	85	NUM
iajs-512	6	14	%	%	NOUN
iajs-512	6	15	with	with	ADP
iajs-512	6	16	increase	increase	NOUN
iajs-512	6	17	flow	flow	NOUN
iajs-512	6	18	rate	rate	NOUN
iajs-512	6	19	of	of	ADP
iajs-512	6	20	o2	o2	PROPN
iajs-512	6	21	,	,	PUNCT
iajs-512	6	22	and	and	CCONJ
iajs-512	6	23	the	the	DET
iajs-512	6	24	optical	optical	ADJ
iajs-512	6	25	band	band	NOUN
iajs-512	6	26	gap	gap	NOUN
iajs-512	6	27	of	of	ADP
iajs-512	6	28	zno	zno	NOUN
iajs-512	6	29	films	film	NOUN
iajs-512	6	30	was	be	AUX
iajs-512	6	31	found	find	VERB
iajs-512	6	32	to	to	PART
iajs-512	6	33	be	be	AUX
iajs-512	6	34	increased	increase	VERB
iajs-512	6	35	from	from	ADP
iajs-512	6	36	(	(	PUNCT
iajs-512	6	37	3.0	3.0	NUM
iajs-512	6	38	)	)	PUNCT
iajs-512	6	39	ev	ev	X
iajs-512	6	40	to	to	ADP
iajs-512	6	41	(	(	PUNCT
iajs-512	6	42	3.2	3.2	NUM
iajs-512	6	43	)	)	PUNCT
iajs-512	6	44	ev	ev	NOUN
iajs-512	6	45	with	with	ADP
iajs-512	6	46	increase	increase	NOUN
iajs-512	6	47	flow	flow	NOUN
iajs-512	6	48	rate	rate	NOUN
iajs-512	6	49	of	of	ADP
iajs-512	6	50	oxygen.the	oxygen.the	DET
iajs-512	6	51	refractive	refractive	ADJ
iajs-512	6	52	index	index	NOUN
iajs-512	6	53	of	of	ADP
iajs-512	6	54	zno	zno	NOUN
iajs-512	6	55	flims	flim	NOUN
iajs-512	6	56	increased	increase	VERB
iajs-512	6	57	from	from	ADP
iajs-512	6	58	(	(	PUNCT
iajs-512	6	59	1.1	1.1	NUM
iajs-512	6	60	)	)	PUNCT
iajs-512	6	61	to	to	ADP
iajs-512	6	62	(	(	PUNCT
iajs-512	6	63	1.27	1.27	NUM
iajs-512	6	64	)	)	PUNCT
iajs-512	6	65	with	with	ADP
iajs-512	6	66	increase	increase	NOUN
iajs-512	6	67	flow	flow	NOUN
iajs-512	6	68	rate	rate	NOUN
iajs-512	6	69	of	of	ADP
iajs-512	6	70	o2	o2	PROPN
iajs-512	6	71	.	.	PUNCT
iajs-512	7	1	key	key	ADJ
iajs-512	7	2	word	word	NOUN
iajs-512	7	3	:	:	PUNCT
iajs-512	7	4	zno	zno	NOUN
iajs-512	7	5	thin	thin	ADJ
iajs-512	7	6	films	film	NOUN
iajs-512	7	7	,	,	PUNCT
iajs-512	7	8	x	x	NOUN
iajs-512	7	9	-	-	NOUN
iajs-512	7	10	ray	ray	NOUN
iajs-512	7	11	diffraction	diffraction	NOUN
iajs-512	7	12	,	,	PUNCT
iajs-512	7	13	optical	optical	ADJ
iajs-512	7	14	properties	property	NOUN
iajs-512	7	15	.	.	PUNCT
iajs-512	8	1	137	137	NUM
iajs-512	8	2	|	|	NOUN
iajs-512	8	3	physics	physics	PROPN
iajs-512	8	4	@1a@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@úó‘ój	@1a@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@úó‘ój	PROPN
iajs-512	8	5	�	�	PROPN
iajs-512	8	6	n€a@î@úœäñ€a@‚ï‹»‹€@·ró	n€a@î@úœäñ€a@‚ï‹»‹€@·ró	NUM
iajs-512	8	7	:	:	PUNCT
iajs-512	8	8	a@âig@ú‹	a@âig@ú‹	PROPN
iajs-512	8	9	©	©	PROPN
iajs-512	8	10	@ü‹26@@öü»€a@i1@‚b«@h2013	@ü‹26@@öü»€a@i1@‚b«@h2013	PROPN
iajs-512	8	11	ibn	ibn	PROPN
iajs-512	8	12	al	al	PROPN
iajs-512	8	13	-	-	PUNCT
iajs-512	8	14	haitham	haitham	PROPN
iajs-512	8	15	jour	jour	X
iajs-512	8	16	.	.	PROPN
iajs-512	9	1	for	for	ADP
iajs-512	9	2	pure	pure	ADJ
iajs-512	9	3	&	&	CCONJ
iajs-512	9	4	appl	appl	PROPN
iajs-512	9	5	.	.	PUNCT
iajs-512	10	1	sci	sci	PROPN
iajs-512	10	2	.	.	PUNCT
iajs-512	10	3	vol	vol	NOUN
iajs-512	10	4	.	.	PROPN
iajs-512	11	1	26	26	NUM
iajs-512	11	2	(	(	PUNCT
iajs-512	11	3	1	1	NUM
iajs-512	11	4	)	)	PUNCT
iajs-512	11	5	2013	2013	NUM
iajs-512	11	6	introduction	introduction	NOUN
iajs-512	11	7	zinc	zinc	NOUN
iajs-512	11	8	oxide	oxide	NOUN
iajs-512	11	9	(	(	PUNCT
iajs-512	11	10	zno	zno	NOUN
iajs-512	11	11	)	)	PUNCT
iajs-512	11	12	is	be	AUX
iajs-512	11	13	n	n	PRON
iajs-512	11	14	–	–	PUNCT
iajs-512	11	15	type	type	NOUN
iajs-512	11	16	semiconductor	semiconductor	NOUN
iajs-512	11	17	of	of	ADP
iajs-512	11	18	wurtzite	wurtzite	ADJ
iajs-512	11	19	structure	structure	NOUN
iajs-512	11	20	exhibits	exhibit	VERB
iajs-512	11	21	many	many	ADJ
iajs-512	11	22	interesting	interesting	ADJ
iajs-512	11	23	properties	property	NOUN
iajs-512	11	24	,	,	PUNCT
iajs-512	11	25	such	such	ADJ
iajs-512	11	26	as	as	ADP
iajs-512	11	27	a	a	DET
iajs-512	11	28	wide	wide	ADJ
iajs-512	11	29	energy	energy	NOUN
iajs-512	11	30	band	band	NOUN
iajs-512	11	31	gap	gap	NOUN
iajs-512	11	32	(	(	PUNCT
iajs-512	11	33	3.37)ev	3.37)ev	PROPN
iajs-512	11	34	,	,	PUNCT
iajs-512	11	35	high	high	ADJ
iajs-512	11	36	excitonic	excitonic	ADJ
iajs-512	11	37	binding	bind	VERB
iajs-512	11	38	energy	energy	NOUN
iajs-512	11	39	(	(	PUNCT
iajs-512	11	40	60)mev	60)mev	NUM
iajs-512	11	41	,	,	PUNCT
iajs-512	11	42	high	high	ADJ
iajs-512	11	43	photoconductivity	photoconductivity	NOUN
iajs-512	11	44	and	and	CCONJ
iajs-512	11	45	important	important	ADJ
iajs-512	11	46	piezoelectric	piezoelectric	NOUN
iajs-512	11	47	and	and	CCONJ
iajs-512	11	48	pyroelectric	pyroelectric	ADJ
iajs-512	11	49	properties	property	NOUN
iajs-512	11	50	.	.	PUNCT
iajs-512	12	1	these	these	DET
iajs-512	12	2	behaviors	behavior	NOUN
iajs-512	12	3	make	make	VERB
iajs-512	12	4	this	this	DET
iajs-512	12	5	compound	compound	NOUN
iajs-512	12	6	useful	useful	ADJ
iajs-512	12	7	for	for	ADP
iajs-512	12	8	numerous	numerous	ADJ
iajs-512	12	9	technological	technological	ADJ
iajs-512	12	10	applications	application	NOUN
iajs-512	12	11	,	,	PUNCT
iajs-512	12	12	such	such	ADJ
iajs-512	12	13	as	as	ADP
iajs-512	12	14	transparent	transparent	ADJ
iajs-512	12	15	conducting	conducting	NOUN
iajs-512	12	16	electrodes	electrode	NOUN
iajs-512	12	17	,	,	PUNCT
iajs-512	12	18	ultraviolet	ultraviolet	NOUN
iajs-512	12	19	,	,	PUNCT
iajs-512	12	20	surface	surface	NOUN
iajs-512	12	21	acoustic	acoustic	ADJ
iajs-512	12	22	waves	wave	NOUN
iajs-512	12	23	filters	filter	NOUN
iajs-512	12	24	,	,	PUNCT
iajs-512	12	25	gas	gas	NOUN
iajs-512	12	26	sensors	sensor	NOUN
iajs-512	12	27	and	and	CCONJ
iajs-512	12	28	recently	recently	ADV
iajs-512	12	29	in	in	ADP
iajs-512	12	30	nanoelectronics	nanoelectronic	NOUN
iajs-512	12	31	and	and	CCONJ
iajs-512	12	32	photonics	photonic	NOUN
iajs-512	12	33	.	.	PUNCT
iajs-512	13	1	a	a	DET
iajs-512	13	2	variety	variety	NOUN
iajs-512	13	3	of	of	ADP
iajs-512	13	4	techniques	technique	NOUN
iajs-512	13	5	such	such	ADJ
iajs-512	13	6	as	as	ADP
iajs-512	13	7	pulse	pulse	NOUN
iajs-512	13	8	laser	laser	NOUN
iajs-512	13	9	deposition	deposition	NOUN
iajs-512	13	10	,	,	PUNCT
iajs-512	13	11	molecular	molecular	ADJ
iajs-512	13	12	beam	beam	NOUN
iajs-512	13	13	epitaxy	epitaxy	NOUN
iajs-512	13	14	,	,	PUNCT
iajs-512	13	15	vapor	vapor	NOUN
iajs-512	13	16	phase	phase	NOUN
iajs-512	13	17	transport	transport	NOUN
iajs-512	13	18	,	,	PUNCT
iajs-512	13	19	chemical	chemical	NOUN
iajs-512	13	20	vapor	vapor	NOUN
iajs-512	13	21	deposition	deposition	NOUN
iajs-512	13	22	,	,	PUNCT
iajs-512	13	23	r.f	r.f	PROPN
iajs-512	13	24	.	.	PROPN
iajs-512	13	25	sputtering	sputtering	PROPN
iajs-512	13	26	,	,	PUNCT
iajs-512	13	27	spray	spray	NOUN
iajs-512	13	28	pyrolysis	pyrolysis	NOUN
iajs-512	13	29	,	,	PUNCT
iajs-512	13	30	ect	ect	ADJ
iajs-512	13	31	.	.	PUNCT
iajs-512	14	1	[	[	X
iajs-512	14	2	1	1	NUM
iajs-512	14	3	-	-	SYM
iajs-512	14	4	3	3	NUM
iajs-512	14	5	]	]	PUNCT
iajs-512	14	6	.	.	PUNCT
iajs-512	15	1	however	however	ADV
iajs-512	15	2	,	,	PUNCT
iajs-512	15	3	not	not	PART
iajs-512	15	4	much	much	ADJ
iajs-512	15	5	attention	attention	NOUN
iajs-512	15	6	has	have	AUX
iajs-512	15	7	been	be	AUX
iajs-512	15	8	paid	pay	VERB
iajs-512	15	9	to	to	ADP
iajs-512	15	10	the	the	DET
iajs-512	15	11	preparation	preparation	NOUN
iajs-512	15	12	of	of	ADP
iajs-512	15	13	zno	zno	NOUN
iajs-512	15	14	films	film	NOUN
iajs-512	15	15	by	by	ADP
iajs-512	15	16	thermal	thermal	ADJ
iajs-512	15	17	oxidation	oxidation	NOUN
iajs-512	15	18	of	of	ADP
iajs-512	15	19	metallic	metallic	ADJ
iajs-512	15	20	zn	zn	PROPN
iajs-512	15	21	thin	thin	PROPN
iajs-512	15	22	films	film	NOUN
iajs-512	15	23	,	,	PUNCT
iajs-512	15	24	such	such	DET
iajs-512	15	25	a	a	DET
iajs-512	15	26	method	method	NOUN
iajs-512	15	27	is	be	AUX
iajs-512	15	28	a	a	DET
iajs-512	15	29	relatively	relatively	ADV
iajs-512	15	30	simple	simple	ADJ
iajs-512	15	31	and	and	CCONJ
iajs-512	15	32	lowcost	lowcost	NOUN
iajs-512	15	33	procedure	procedure	NOUN
iajs-512	15	34	that	that	PRON
iajs-512	15	35	does	do	AUX
iajs-512	15	36	not	not	PART
iajs-512	15	37	require	require	VERB
iajs-512	15	38	any	any	DET
iajs-512	15	39	calalyst	calalyst	NOUN
iajs-512	15	40	or	or	CCONJ
iajs-512	15	41	highertemperature	highertemperature	NOUN
iajs-512	15	42	growth[4	growth[4	NOUN
iajs-512	15	43	]	]	PUNCT
iajs-512	15	44	.	.	PUNCT
iajs-512	16	1	many	many	ADJ
iajs-512	16	2	of	of	ADP
iajs-512	16	3	searchers	searcher	NOUN
iajs-512	16	4	works	work	VERB
iajs-512	16	5	of	of	ADP
iajs-512	16	6	zno	zno	NOUN
iajs-512	16	7	thin	thin	PROPN
iajs-512	16	8	films	film	NOUN
iajs-512	16	9	as	as	ADP
iajs-512	16	10	[	[	X
iajs-512	16	11	1	1	NUM
iajs-512	16	12	-	-	SYM
iajs-512	16	13	4	4	NUM
iajs-512	16	14	]	]	PUNCT
iajs-512	16	15	.	.	PUNCT
iajs-512	17	1	the	the	DET
iajs-512	17	2	aim	aim	NOUN
iajs-512	17	3	of	of	ADP
iajs-512	17	4	this	this	DET
iajs-512	17	5	paper	paper	NOUN
iajs-512	17	6	is	be	AUX
iajs-512	17	7	study	study	VERB
iajs-512	17	8	structural	structural	ADJ
iajs-512	17	9	and	and	CCONJ
iajs-512	17	10	optical	optical	ADJ
iajs-512	17	11	properties	property	NOUN
iajs-512	17	12	at	at	ADP
iajs-512	17	13	different	different	ADJ
iajs-512	17	14	flow	flow	NOUN
iajs-512	17	15	rates	rate	NOUN
iajs-512	17	16	of	of	ADP
iajs-512	17	17	oxygen	oxygen	NOUN
iajs-512	17	18	.	.	PUNCT
iajs-512	18	1	experimental	experimental	ADJ
iajs-512	18	2	the	the	DET
iajs-512	18	3	metallic	metallic	ADJ
iajs-512	18	4	zn	zn	PROPN
iajs-512	18	5	films	film	NOUN
iajs-512	18	6	were	be	AUX
iajs-512	18	7	deposited	deposit	VERB
iajs-512	18	8	by	by	ADP
iajs-512	18	9	thermal	thermal	ADJ
iajs-512	18	10	evaporation	evaporation	NOUN
iajs-512	18	11	under	under	ADP
iajs-512	18	12	vacuum	vacuum	NOUN
iajs-512	18	13	onto	onto	ADP
iajs-512	18	14	clean	clean	ADJ
iajs-512	18	15	glass	glass	NOUN
iajs-512	18	16	substrates	substrate	NOUN
iajs-512	18	17	by	by	ADP
iajs-512	18	18	vacuum	vacuum	NOUN
iajs-512	18	19	evaporation	evaporation	NOUN
iajs-512	18	20	technique	technique	NOUN
iajs-512	18	21	.	.	PUNCT
iajs-512	19	1	a	a	DET
iajs-512	19	2	cylinder	cylinder	NOUN
iajs-512	19	3	chamber	chamber	NOUN
iajs-512	19	4	of	of	ADP
iajs-512	19	5	height	height	NOUN
iajs-512	19	6	8	8	NUM
iajs-512	19	7	cm	cm	NOUN
iajs-512	19	8	,	,	PUNCT
iajs-512	19	9	closed	close	VERB
iajs-512	19	10	at	at	ADP
iajs-512	19	11	the	the	DET
iajs-512	19	12	top	top	NOUN
iajs-512	19	13	by	by	ADP
iajs-512	19	14	the	the	DET
iajs-512	19	15	substrate	substrate	NOUN
iajs-512	19	16	holder	holder	NOUN
iajs-512	19	17	.	.	PUNCT
iajs-512	20	1	the	the	DET
iajs-512	20	2	residual	residual	ADJ
iajs-512	20	3	pressure	pressure	NOUN
iajs-512	20	4	in	in	ADP
iajs-512	20	5	the	the	DET
iajs-512	20	6	standard	standard	ADJ
iajs-512	20	7	vacuum	vacuum	NOUN
iajs-512	20	8	system	system	NOUN
iajs-512	20	9	used	use	VERB
iajs-512	20	10	was	be	AUX
iajs-512	20	11	about	about	ADV
iajs-512	20	12	4.5	4.5	NUM
iajs-512	20	13	×	×	NOUN
iajs-512	20	14	10	10	NUM
iajs-512	20	15	-5	-5	NOUN
iajs-512	20	16	torr	torr	NOUN
iajs-512	20	17	and	and	CCONJ
iajs-512	20	18	heating	heating	NOUN
iajs-512	20	19	glass	glass	NOUN
iajs-512	20	20	substrates	substrate	NOUN
iajs-512	20	21	at	at	ADP
iajs-512	20	22	200	200	NUM
iajs-512	20	23	℃	℃	PROPN
iajs-512	20	24	.	.	PUNCT
iajs-512	21	1	these	these	DET
iajs-512	21	2	films	film	NOUN
iajs-512	21	3	prepared	prepare	VERB
iajs-512	21	4	at	at	ADP
iajs-512	21	5	thickness	thickness	NOUN
iajs-512	21	6	were	be	AUX
iajs-512	21	7	500±	500±	NOUN
iajs-512	21	8	50	50	NUM
iajs-512	21	9	nm	nm	NOUN
iajs-512	21	10	with	with	ADP
iajs-512	21	11	rate	rate	NOUN
iajs-512	21	12	(	(	PUNCT
iajs-512	21	13	10	10	NUM
iajs-512	21	14	±	±	NUM
iajs-512	21	15	2)nm	2)nm	NUM
iajs-512	21	16	sec	sec	PROPN
iajs-512	21	17	-1	-1	NOUN
iajs-512	21	18	.	.	PUNCT
iajs-512	22	1	after	after	SCONJ
iajs-512	22	2	preparation	preparation	NOUN
iajs-512	22	3	zn	zn	PROPN
iajs-512	22	4	films	film	NOUN
iajs-512	22	5	were	be	AUX
iajs-512	22	6	heated	heat	VERB
iajs-512	22	7	under	under	ADP
iajs-512	22	8	400	400	NUM
iajs-512	22	9	℃	℃	PROPN
iajs-512	22	10	at	at	ADP
iajs-512	22	11	different	different	ADJ
iajs-512	22	12	flow	flow	NOUN
iajs-512	22	13	rates	rate	NOUN
iajs-512	22	14	of	of	ADP
iajs-512	22	15	o2	o2	PROPN
iajs-512	22	16	(	(	PUNCT
iajs-512	22	17	0.5	0.5	NUM
iajs-512	22	18	,	,	PUNCT
iajs-512	22	19	1.0	1.0	NUM
iajs-512	22	20	,	,	PUNCT
iajs-512	22	21	and	and	CCONJ
iajs-512	22	22	1.5	1.5	NUM
iajs-512	22	23	)	)	PUNCT
iajs-512	22	24	litter	litter	NOUN
iajs-512	22	25	/	/	SYM
iajs-512	22	26	min	min	PROPN
iajs-512	22	27	.	.	PROPN
iajs-512	22	28	for	for	ADP
iajs-512	22	29	one	one	NUM
iajs-512	22	30	hour	hour	NOUN
iajs-512	22	31	.	.	PUNCT
iajs-512	23	1	the	the	DET
iajs-512	23	2	crystalline	crystalline	ADJ
iajs-512	23	3	structure	structure	NOUN
iajs-512	23	4	of	of	ADP
iajs-512	23	5	the	the	DET
iajs-512	23	6	studied	study	VERB
iajs-512	23	7	films	film	NOUN
iajs-512	23	8	was	be	AUX
iajs-512	23	9	investigated	investigate	VERB
iajs-512	23	10	by	by	ADP
iajs-512	23	11	x	x	NOUN
iajs-512	23	12	-	-	NOUN
iajs-512	23	13	ray	ray	NOUN
iajs-512	23	14	diffraction	diffraction	NOUN
iajs-512	23	15	(	(	PUNCT
iajs-512	23	16	xrd	xrd	NOUN
iajs-512	23	17	)	)	PUNCT
iajs-512	23	18	analysis	analysis	NOUN
iajs-512	23	19	using	use	VERB
iajs-512	23	20	cu	cu	PROPN
iajs-512	23	21	-	-	PUNCT
iajs-512	23	22	kα	kα	PROPN
iajs-512	23	23	radiation	radiation	NOUN
iajs-512	23	24	(	(	PUNCT
iajs-512	23	25	λ=	λ=	VERB
iajs-512	23	26	1.5418	1.5418	NUM
iajs-512	23	27	)	)	PUNCT
iajs-512	23	28	a	a	DET
iajs-512	23	29	◦	◦	NOUN
iajs-512	23	30	in	in	ADP
iajs-512	23	31	the	the	DET
iajs-512	23	32	rang	ring	VERB
iajs-512	23	33	2θ	2θ	NUM
iajs-512	23	34	=	=	SYM
iajs-512	23	35	20	20	NUM
iajs-512	23	36	◦	◦	NOUN
iajs-512	23	37	-80	-80	SYM
iajs-512	23	38	◦	◦	NOUN
iajs-512	23	39	.	.	PUNCT
iajs-512	24	1	the	the	DET
iajs-512	24	2	films	film	NOUN
iajs-512	24	3	transmittance	transmittance	NOUN
iajs-512	24	4	was	be	AUX
iajs-512	24	5	measured	measure	VERB
iajs-512	24	6	using	use	VERB
iajs-512	24	7	a	a	DET
iajs-512	24	8	uv	uv	NOUN
iajs-512	24	9	-	-	PUNCT
iajs-512	24	10	vis	vis	X
iajs-512	24	11	spectrometer	spectrometer	NOUN
iajs-512	24	12	in	in	ADP
iajs-512	24	13	the	the	DET
iajs-512	24	14	wavelength	wavelength	NOUN
iajs-512	24	15	range	range	NOUN
iajs-512	24	16	(	(	PUNCT
iajs-512	24	17	300	300	NUM
iajs-512	24	18	–	–	SYM
iajs-512	24	19	1100	1100	NUM
iajs-512	24	20	)	)	PUNCT
iajs-512	24	21	nm	nm	NOUN
iajs-512	24	22	.	.	PUNCT
iajs-512	25	1	results	result	NOUN
iajs-512	25	2	and	and	CCONJ
iajs-512	25	3	discussion	discussion	NOUN
iajs-512	25	4	fig	fig	NOUN
iajs-512	25	5	.	.	PUNCT
iajs-512	26	1	(	(	PUNCT
iajs-512	26	2	1	1	X
iajs-512	26	3	)	)	PUNCT
iajs-512	26	4	shows	show	VERB
iajs-512	26	5	the	the	DET
iajs-512	26	6	xrd	xrd	PROPN
iajs-512	26	7	spectra	spectra	PROPN
iajs-512	26	8	of	of	ADP
iajs-512	26	9	zno	zno	NOUN
iajs-512	26	10	films	film	NOUN
iajs-512	26	11	prepared	prepare	VERB
iajs-512	26	12	at	at	ADP
iajs-512	26	13	different	different	ADJ
iajs-512	26	14	flow	flow	NOUN
iajs-512	26	15	of	of	ADP
iajs-512	26	16	oxygen	oxygen	NOUN
iajs-512	26	17	which	which	PRON
iajs-512	26	18	are	be	AUX
iajs-512	26	19	(	(	PUNCT
iajs-512	26	20	0.5	0.5	NUM
iajs-512	26	21	,	,	PUNCT
iajs-512	26	22	1.0	1.0	NUM
iajs-512	26	23	,	,	PUNCT
iajs-512	26	24	and	and	CCONJ
iajs-512	26	25	1.5	1.5	NUM
iajs-512	26	26	)	)	PUNCT
iajs-512	26	27	litter	litter	NOUN
iajs-512	26	28	/	/	SYM
iajs-512	26	29	min	min	PROPN
iajs-512	26	30	.	.	PROPN
iajs-512	26	31	,	,	PUNCT
iajs-512	26	32	respectively	respectively	ADV
iajs-512	26	33	.	.	PUNCT
iajs-512	27	1	for	for	ADP
iajs-512	27	2	all	all	DET
iajs-512	27	3	as	as	ADP
iajs-512	27	4	–	–	PUNCT
iajs-512	27	5	grown	grown	ADJ
iajs-512	27	6	films	film	NOUN
iajs-512	27	7	,	,	PUNCT
iajs-512	27	8	a	a	DET
iajs-512	27	9	strong	strong	ADJ
iajs-512	27	10	peak	peak	NOUN
iajs-512	27	11	corresponding	correspond	VERB
iajs-512	27	12	to	to	ADP
iajs-512	27	13	(	(	PUNCT
iajs-512	27	14	002	002	NUM
iajs-512	27	15	)	)	PUNCT
iajs-512	27	16	plane	plane	NOUN
iajs-512	27	17	at	at	ADP
iajs-512	27	18	around	around	ADP
iajs-512	27	19	34	34	NUM
iajs-512	27	20	◦	◦	NOUN
iajs-512	27	21	,	,	PUNCT
iajs-512	27	22	which	which	PRON
iajs-512	27	23	presented	present	VERB
iajs-512	27	24	the	the	DET
iajs-512	27	25	zno	zno	NOUN
iajs-512	27	26	films	film	NOUN
iajs-512	27	27	are	be	AUX
iajs-512	27	28	polycrystalline	polycrystalline	ADJ
iajs-512	27	29	and	and	CCONJ
iajs-512	27	30	have	have	VERB
iajs-512	27	31	hexagonal	hexagonal	ADJ
iajs-512	27	32	structure	structure	NOUN
iajs-512	27	33	.	.	PUNCT
iajs-512	28	1	the	the	DET
iajs-512	28	2	diffraction	diffraction	NOUN
iajs-512	28	3	intensiveities	intensiveitie	NOUN
iajs-512	28	4	of	of	ADP
iajs-512	28	5	the	the	DET
iajs-512	28	6	(	(	PUNCT
iajs-512	28	7	002	002	NUM
iajs-512	28	8	)	)	PUNCT
iajs-512	28	9	(	(	PUNCT
iajs-512	28	10	100	100	NUM
iajs-512	28	11	)	)	PUNCT
iajs-512	28	12	and	and	CCONJ
iajs-512	28	13	(	(	PUNCT
iajs-512	28	14	101	101	NUM
iajs-512	28	15	)	)	PUNCT
iajs-512	28	16	direction	direction	NOUN
iajs-512	28	17	are	be	AUX
iajs-512	28	18	increased	increase	VERB
iajs-512	28	19	with	with	ADP
iajs-512	28	20	theincrease	theincrease	NOUN
iajs-512	28	21	of	of	ADP
iajs-512	28	22	flow	flow	NOUN
iajs-512	28	23	rate	rate	NOUN
iajs-512	28	24	oxygen	oxygen	NOUN
iajs-512	28	25	,	,	PUNCT
iajs-512	28	26	that	that	PRON
iajs-512	28	27	means	mean	VERB
iajs-512	28	28	improving	improve	VERB
iajs-512	28	29	crystalline	crystalline	ADJ
iajs-512	28	30	material[5,6	material[5,6	PROPN
iajs-512	28	31	]	]	X
iajs-512	28	32	.	.	PUNCT
iajs-512	29	1	fig	fig	NOUN
iajs-512	29	2	.	.	PUNCT
iajs-512	30	1	(	(	PUNCT
iajs-512	30	2	2	2	X
iajs-512	30	3	)	)	PUNCT
iajs-512	30	4	displays	display	VERB
iajs-512	30	5	stress	stress	VERB
iajs-512	30	6	along	along	ADP
iajs-512	30	7	the	the	DET
iajs-512	30	8	c	c	NOUN
iajs-512	30	9	-	-	PUNCT
iajs-512	30	10	axis	axis	NOUN
iajs-512	30	11	for	for	ADP
iajs-512	30	12	the	the	DET
iajs-512	30	13	zno	zno	NOUN
iajs-512	30	14	films	film	NOUN
iajs-512	30	15	as	as	ADP
iajs-512	30	16	a	a	DET
iajs-512	30	17	function	function	NOUN
iajs-512	30	18	of	of	ADP
iajs-512	30	19	the	the	DET
iajs-512	30	20	flow	flow	NOUN
iajs-512	30	21	rate	rate	NOUN
iajs-512	30	22	of	of	ADP
iajs-512	30	23	oxygen	oxygen	NOUN
iajs-512	30	24	.	.	PUNCT
iajs-512	31	1	the	the	DET
iajs-512	31	2	variation	variation	NOUN
iajs-512	31	3	of	of	ADP
iajs-512	31	4	the	the	DET
iajs-512	31	5	curve	curve	NOUN
iajs-512	31	6	presents	present	VERB
iajs-512	31	7	that	that	PRON
iajs-512	31	8	with	with	ADP
iajs-512	31	9	oxygen	oxygen	NOUN
iajs-512	31	10	flow	flow	NOUN
iajs-512	31	11	rate	rate	NOUN
iajs-512	31	12	increase	increase	NOUN
iajs-512	31	13	,	,	PUNCT
iajs-512	31	14	stress	stress	NOUN
iajs-512	31	15	along	along	ADP
iajs-512	31	16	c	c	NOUN
iajs-512	31	17	-	-	PUNCT
iajs-512	31	18	axis	axis	NOUN
iajs-512	31	19	slightly	slightly	ADJ
iajs-512	31	20	increases	increase	NOUN
iajs-512	31	21	and	and	CCONJ
iajs-512	31	22	the	the	DET
iajs-512	31	23	film	film	NOUN
iajs-512	31	24	stress	stress	NOUN
iajs-512	31	25	𝜎	𝜎	PROPN
iajs-512	31	26	along	along	ADP
iajs-512	31	27	the	the	DET
iajs-512	31	28	c	c	NOUN
iajs-512	31	29	-	-	PUNCT
iajs-512	31	30	axis	axis	NOUN
iajs-512	31	31	is	be	AUX
iajs-512	31	32	given	give	VERB
iajs-512	31	33	by	by	ADP
iajs-512	31	34	(	(	PUNCT
iajs-512	31	35	c	c	NOUN
iajs-512	31	36	◦	◦	NOUN
iajs-512	31	37	c)/c	c)/c	NOUN
iajs-512	31	38	◦	◦	NOUN
iajs-512	31	39	where	where	SCONJ
iajs-512	31	40	c	c	PROPN
iajs-512	31	41	is	be	AUX
iajs-512	31	42	the	the	DET
iajs-512	31	43	lattice	lattice	PROPN
iajs-512	31	44	constant	constant	PROPN
iajs-512	31	45	obtained	obtain	VERB
iajs-512	31	46	from	from	ADP
iajs-512	31	47	the	the	DET
iajs-512	31	48	(	(	PUNCT
iajs-512	31	49	002	002	NUM
iajs-512	31	50	)	)	PUNCT
iajs-512	31	51	direction	direction	NOUN
iajs-512	31	52	in	in	ADP
iajs-512	31	53	the	the	DET
iajs-512	31	54	xrd	xrd	NOUN
iajs-512	31	55	spectra	spectra	PROPN
iajs-512	31	56	and	and	CCONJ
iajs-512	31	57	c	c	ADP
iajs-512	31	58	◦	◦	NOUN
iajs-512	31	59	is	be	AUX
iajs-512	31	60	0.5205	0.5205	NUM
iajs-512	31	61	nm	nm	NOUN
iajs-512	31	62	measured	measure	VERB
iajs-512	31	63	from	from	ADP
iajs-512	31	64	bulk	bulk	ADJ
iajs-512	31	65	zno[5	zno[5	PROPN
iajs-512	31	66	]	]	PUNCT
iajs-512	31	67	.	.	PUNCT
iajs-512	32	1	the	the	DET
iajs-512	32	2	stress	stress	NOUN
iajs-512	32	3	𝜎	𝜎	PROPN
iajs-512	32	4	along	along	ADP
iajs-512	32	5	the	the	DET
iajs-512	32	6	caxis	caxis	NOUN
iajs-512	32	7	with	with	ADP
iajs-512	32	8	a	a	DET
iajs-512	32	9	hexagonal	hexagonal	ADJ
iajs-512	32	10	crystal	crystal	NOUN
iajs-512	32	11	structure	structure	NOUN
iajs-512	32	12	is	be	AUX
iajs-512	32	13	given	give	VERB
iajs-512	32	14	by	by	ADP
iajs-512	32	15	the	the	DET
iajs-512	32	16	following	follow	VERB
iajs-512	32	17	equation	equation	NOUN
iajs-512	32	18	[	[	X
iajs-512	32	19	5	5	NUM
iajs-512	32	20	]	]	PUNCT
iajs-512	32	21	:	:	PUNCT
iajs-512	32	22	𝜎	𝜎	PROPN
iajs-512	32	23	=	=	SYM
iajs-512	32	24	�	�	PROPN
iajs-512	32	25	2𝐶13	2𝐶13	PROPN
iajs-512	32	26	2	2	NUM
iajs-512	32	27	−	−	NOUN
iajs-512	32	28	𝐶33𝐶11−𝐶33𝐶12	𝐶33𝐶11−𝐶33𝐶12	ADP
iajs-512	32	29	𝐶13	𝐶13	PROPN
iajs-512	32	30	�	�	PROPN
iajs-512	32	31	𝐶	𝐶	PROPN
iajs-512	32	32	°	°	PROPN
iajs-512	32	33	−𝐶	−𝐶	PROPN
iajs-512	32	34	𝐶	𝐶	PROPN
iajs-512	32	35	°	°	PROPN
iajs-512	32	36	…	…	PUNCT
iajs-512	32	37	…	…	PUNCT
iajs-512	32	38	…	…	PUNCT
iajs-512	32	39	(	(	PUNCT
iajs-512	32	40	1	1	X
iajs-512	32	41	)	)	PUNCT
iajs-512	32	42	where	where	SCONJ
iajs-512	32	43	c	c	PROPN
iajs-512	32	44	ij	ij	INTJ
iajs-512	32	45	is	be	AUX
iajs-512	32	46	elastic	elastic	ADJ
iajs-512	32	47	stiffness	stiffness	NOUN
iajs-512	32	48	constant	constant	ADJ
iajs-512	32	49	of	of	ADP
iajs-512	32	50	zno	zno	NOUN
iajs-512	32	51	,	,	PUNCT
iajs-512	32	52	c11=209.7	c11=209.7	NOUN
iajs-512	32	53	gpa	gpa	PROPN
iajs-512	32	54	,	,	PUNCT
iajs-512	32	55	c12	c12	PROPN
iajs-512	32	56	121.1	121.1	NUM
iajs-512	32	57	=	=	SYM
iajs-512	32	58	gpa	gpa	PROPN
iajs-512	32	59	,	,	PUNCT
iajs-512	32	60	c33=	c33=	PROPN
iajs-512	32	61	210.9	210.9	NUM
iajs-512	32	62	gpa	gpa	PROPN
iajs-512	32	63	and	and	CCONJ
iajs-512	32	64	c13=	c13=	PROPN
iajs-512	32	65	105.1	105.1	NUM
iajs-512	32	66	gpa	gpa	PROPN
iajs-512	32	67	[	[	X
iajs-512	32	68	5	5	NUM
iajs-512	32	69	]	]	PUNCT
iajs-512	32	70	.	.	PUNCT
iajs-512	33	1	substituting	substitute	VERB
iajs-512	33	2	these	these	DET
iajs-512	33	3	values	value	NOUN
iajs-512	33	4	in	in	ADP
iajs-512	33	5	the	the	DET
iajs-512	33	6	above	above	ADJ
iajs-512	33	7	equation	equation	NOUN
iajs-512	33	8	gives[5	gives[5	PROPN
iajs-512	33	9	]	]	PUNCT
iajs-512	33	10	:	:	PUNCT
iajs-512	33	11	𝜎	𝜎	PROPN
iajs-512	33	12	�	�	PROPN
iajs-512	33	13	𝑁	𝑁	PROPN
iajs-512	33	14	𝑚2	𝑚2	PROPN
iajs-512	33	15	�	�	PROPN
iajs-512	33	16	�	�	PROPN
iajs-512	33	17	=	=	PROPN
iajs-512	33	18	−453.6	−453.6	ADJ
iajs-512	33	19	×	×	PROPN
iajs-512	33	20	109	109	NUM
iajs-512	33	21	𝐶	𝐶	PROPN
iajs-512	33	22	°	°	PROPN
iajs-512	33	23	−𝐶	−𝐶	PROPN
iajs-512	33	24	𝐶	𝐶	PROPN
iajs-512	33	25	°	°	PROPN
iajs-512	33	26	…	…	PUNCT
iajs-512	33	27	…	…	PUNCT
iajs-512	33	28	…	…	PUNCT
iajs-512	33	29	...	...	PUNCT
iajs-512	33	30	(	(	PUNCT
iajs-512	33	31	2	2	NUM
iajs-512	33	32	)	)	PUNCT
iajs-512	33	33	138	138	NUM
iajs-512	33	34	|	|	NOUN
iajs-512	33	35	physics	physics	PROPN
iajs-512	33	36	@1a@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@úó‘ój	@1a@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@úó‘ój	PROPN
iajs-512	33	37	�	�	PROPN
iajs-512	33	38	n€a@î@úœäñ€a@‚ï‹»‹€@·ró	n€a@î@úœäñ€a@‚ï‹»‹€@·ró	NUM
iajs-512	33	39	:	:	PUNCT
iajs-512	33	40	a@âig@ú‹	a@âig@ú‹	PROPN
iajs-512	33	41	©	©	PROPN
iajs-512	33	42	@ü‹26@@öü»€a@i1@‚b«@h2013	@ü‹26@@öü»€a@i1@‚b«@h2013	PROPN
iajs-512	33	43	ibn	ibn	PROPN
iajs-512	33	44	al	al	PROPN
iajs-512	33	45	-	-	PUNCT
iajs-512	33	46	haitham	haitham	PROPN
iajs-512	33	47	jour	jour	X
iajs-512	33	48	.	.	PROPN
iajs-512	33	49	for	for	ADP
iajs-512	33	50	pure	pure	ADJ
iajs-512	33	51	&	&	CCONJ
iajs-512	33	52	appl	appl	PROPN
iajs-512	33	53	.	.	PUNCT
iajs-512	34	1	sci	sci	PROPN
iajs-512	34	2	.	.	PUNCT
iajs-512	34	3	vol	vol	NOUN
iajs-512	34	4	.	.	PROPN
iajs-512	35	1	26	26	NUM
iajs-512	35	2	(	(	PUNCT
iajs-512	35	3	1	1	NUM
iajs-512	35	4	)	)	PUNCT
iajs-512	35	5	2013	2013	NUM
iajs-512	35	6	according	accord	VERB
iajs-512	35	7	to	to	ADP
iajs-512	35	8	the	the	DET
iajs-512	35	9	above	above	ADJ
iajs-512	35	10	equation	equation	NOUN
iajs-512	35	11	,	,	PUNCT
iajs-512	35	12	if	if	SCONJ
iajs-512	35	13	the	the	DET
iajs-512	35	14	stress	stress	NOUN
iajs-512	35	15	𝜎	𝜎	PROPN
iajs-512	35	16	is	be	AUX
iajs-512	35	17	positive	positive	ADJ
iajs-512	35	18	,	,	PUNCT
iajs-512	35	19	the	the	DET
iajs-512	35	20	biaxial	biaxial	NOUN
iajs-512	35	21	stress	stress	NOUN
iajs-512	35	22	is	be	AUX
iajs-512	35	23	tensile	tensile	ADJ
iajs-512	35	24	,	,	PUNCT
iajs-512	35	25	if	if	SCONJ
iajs-512	35	26	the	the	DET
iajs-512	35	27	stress	stress	NOUN
iajs-512	35	28	is	be	AUX
iajs-512	35	29	negative	negative	ADJ
iajs-512	35	30	,	,	PUNCT
iajs-512	35	31	the	the	DET
iajs-512	35	32	biaxial	biaxial	NOUN
iajs-512	35	33	stress	stress	NOUN
iajs-512	35	34	is	be	AUX
iajs-512	35	35	compressive	compressive	ADJ
iajs-512	35	36	[	[	X
iajs-512	35	37	5	5	NUM
iajs-512	35	38	]	]	PUNCT
iajs-512	35	39	.	.	PUNCT
iajs-512	36	1	all	all	DET
iajs-512	36	2	the	the	DET
iajs-512	36	3	asgrown	asgrown	NOUN
iajs-512	36	4	films	film	NOUN
iajs-512	36	5	exhibit	exhibit	VERB
iajs-512	36	6	tensile	tensile	NOUN
iajs-512	36	7	stress	stress	NOUN
iajs-512	36	8	,	,	PUNCT
iajs-512	36	9	when	when	SCONJ
iajs-512	36	10	the	the	DET
iajs-512	36	11	flow	flow	NOUN
iajs-512	36	12	rate	rate	NOUN
iajs-512	36	13	of	of	ADP
iajs-512	36	14	oxygen	oxygen	NOUN
iajs-512	36	15	increases	increase	NOUN
iajs-512	36	16	from	from	ADP
iajs-512	36	17	0.5	0.5	NUM
iajs-512	36	18	to	to	PART
iajs-512	36	19	1.5	1.5	NUM
iajs-512	36	20	litter	litter	NOUN
iajs-512	36	21	/	/	SYM
iajs-512	36	22	min	min	NOUN
iajs-512	36	23	.	.	PROPN
iajs-512	36	24	,	,	PUNCT
iajs-512	36	25	the	the	DET
iajs-512	36	26	tensile	tensile	NOUN
iajs-512	36	27	stress	stress	NOUN
iajs-512	36	28	increases	increase	VERB
iajs-512	36	29	from	from	ADP
iajs-512	36	30	3.962×	3.962×	NUM
iajs-512	36	31	10	10	NUM
iajs-512	36	32	6	6	NUM
iajs-512	36	33	n	n	CCONJ
iajs-512	36	34	/	/	SYM
iajs-512	36	35	m2	m2	PROPN
iajs-512	36	36	to	to	ADP
iajs-512	36	37	4.092×	4.092×	PROPN
iajs-512	36	38	106	106	NUM
iajs-512	36	39	n	n	CCONJ
iajs-512	36	40	/	/	SYM
iajs-512	36	41	m2	m2	PROPN
iajs-512	36	42	,	,	PUNCT
iajs-512	36	43	and	and	CCONJ
iajs-512	36	44	this	this	DET
iajs-512	36	45	result	result	NOUN
iajs-512	36	46	breffare	breffare	VERB
iajs-512	36	47	from	from	ADP
iajs-512	36	48	result	result	NOUN
iajs-512	36	49	reference	reference	NOUN
iajs-512	36	50	[	[	X
iajs-512	36	51	6	6	NUM
iajs-512	36	52	]	]	PUNCT
iajs-512	36	53	.	.	PUNCT
iajs-512	37	1	fig	fig	NOUN
iajs-512	37	2	.	.	PUNCT
iajs-512	38	1	(	(	PUNCT
iajs-512	38	2	3	3	X
iajs-512	38	3	)	)	PUNCT
iajs-512	38	4	shows	show	VERB
iajs-512	38	5	the	the	DET
iajs-512	38	6	transmission	transmission	NOUN
iajs-512	38	7	for	for	ADP
iajs-512	38	8	zno	zno	NOUN
iajs-512	38	9	thin	thin	PROPN
iajs-512	38	10	films	film	NOUN
iajs-512	38	11	with	with	ADP
iajs-512	38	12	wavelength	wavelength	NOUN
iajs-512	38	13	at	at	ADP
iajs-512	38	14	different	different	ADJ
iajs-512	38	15	oxygen	oxygen	NOUN
iajs-512	38	16	gas	gas	NOUN
iajs-512	38	17	flow	flow	NOUN
iajs-512	38	18	,	,	PUNCT
iajs-512	38	19	we	we	PRON
iajs-512	38	20	can	can	AUX
iajs-512	38	21	see	see	VERB
iajs-512	38	22	from	from	ADP
iajs-512	38	23	this	this	DET
iajs-512	38	24	fig	fig	NOUN
iajs-512	38	25	.	.	PUNCT
iajs-512	39	1	the	the	DET
iajs-512	39	2	transmission	transmission	NOUN
iajs-512	39	3	increases	increase	VERB
iajs-512	39	4	with	with	ADP
iajs-512	39	5	the	the	DET
iajs-512	39	6	increase	increase	NOUN
iajs-512	39	7	of	of	ADP
iajs-512	39	8	oxygen	oxygen	NOUN
iajs-512	39	9	flow	flow	NOUN
iajs-512	39	10	rate	rate	NOUN
iajs-512	39	11	,	,	PUNCT
iajs-512	39	12	and	and	CCONJ
iajs-512	39	13	was	be	AUX
iajs-512	39	14	attributed	attribute	VERB
iajs-512	39	15	mainly	mainly	ADV
iajs-512	39	16	to	to	ADP
iajs-512	39	17	the	the	DET
iajs-512	39	18	improvement	improvement	NOUN
iajs-512	39	19	of	of	ADP
iajs-512	39	20	crystalline	crystalline	NOUN
iajs-512	39	21	structures	structure	NOUN
iajs-512	39	22	of	of	ADP
iajs-512	39	23	the	the	DET
iajs-512	39	24	films	film	NOUN
iajs-512	39	25	.	.	PUNCT
iajs-512	40	1	in	in	ADP
iajs-512	40	2	near	near	ADP
iajs-512	40	3	infrared	infrared	ADJ
iajs-512	40	4	(	(	PUNCT
iajs-512	40	5	nir	nir	NOUN
iajs-512	40	6	)	)	PUNCT
iajs-512	40	7	spectrum	spectrum	NOUN
iajs-512	40	8	region	region	NOUN
iajs-512	40	9	with	with	ADP
iajs-512	40	10	(	(	PUNCT
iajs-512	40	11	900	900	NUM
iajs-512	40	12	-	-	SYM
iajs-512	40	13	1100)nm	1100)nm	NUM
iajs-512	40	14	,	,	PUNCT
iajs-512	40	15	the	the	DET
iajs-512	40	16	average	average	ADJ
iajs-512	40	17	transmission	transmission	NOUN
iajs-512	40	18	is	be	AUX
iajs-512	40	19	more	more	ADJ
iajs-512	40	20	than	than	ADP
iajs-512	40	21	85	85	NUM
iajs-512	40	22	%	%	NOUN
iajs-512	40	23	for	for	ADP
iajs-512	40	24	flow	flow	NOUN
iajs-512	40	25	rate	rate	NOUN
iajs-512	40	26	1.5	1.5	NUM
iajs-512	40	27	litter	litter	NOUN
iajs-512	40	28	/	/	SYM
iajs-512	40	29	min	min	NOUN
iajs-512	40	30	.	.	PROPN
iajs-512	40	31	.	.	PUNCT
iajs-512	41	1	the	the	DET
iajs-512	41	2	optical	optical	ADJ
iajs-512	41	3	absorption	absorption	NOUN
iajs-512	41	4	edge	edge	NOUN
iajs-512	41	5	was	be	AUX
iajs-512	41	6	analyzed	analyze	VERB
iajs-512	41	7	by	by	ADP
iajs-512	41	8	the	the	DET
iajs-512	41	9	following	follow	VERB
iajs-512	41	10	equation	equation	NOUN
iajs-512	41	11	[	[	X
iajs-512	41	12	7	7	NUM
iajs-512	41	13	]	]	PUNCT
iajs-512	41	14	:	:	PUNCT
iajs-512	41	15	∝	∝	PROPN
iajs-512	41	16	ℎ𝑣	ℎ𝑣	VERB
iajs-512	41	17	=	=	SYM
iajs-512	41	18	𝐵	𝐵	PROPN
iajs-512	41	19	�	�	PROPN
iajs-512	41	20	ℎ𝑣	ℎ𝑣	PART
iajs-512	41	21	−	−	PROPN
iajs-512	41	22	𝐸𝑔	𝐸𝑔	PROPN
iajs-512	41	23	�	�	PROPN
iajs-512	41	24	0.5	0.5	NUM
iajs-512	41	25	…	…	PUNCT
iajs-512	41	26	…	…	PUNCT
iajs-512	41	27	…	…	PUNCT
iajs-512	41	28	…	…	PUNCT
iajs-512	41	29	..	..	PUNCT
iajs-512	41	30	(	(	PUNCT
iajs-512	41	31	3	3	X
iajs-512	41	32	)	)	PUNCT
iajs-512	41	33	where	where	SCONJ
iajs-512	41	34	b	b	NOUN
iajs-512	41	35	is	be	AUX
iajs-512	41	36	a	a	DET
iajs-512	41	37	constant	constant	ADJ
iajs-512	41	38	and	and	CCONJ
iajs-512	41	39	∝	∝	PROPN
iajs-512	41	40	is	be	AUX
iajs-512	41	41	absorption	absorption	NOUN
iajs-512	41	42	coefficient	coefficient	NOUN
iajs-512	41	43	.	.	PUNCT
iajs-512	42	1	the	the	DET
iajs-512	42	2	variation	variation	NOUN
iajs-512	42	3	of	of	ADP
iajs-512	42	4	(	(	PUNCT
iajs-512	42	5	∝	∝	PROPN
iajs-512	42	6	ℎ𝑣	ℎ𝑣	VERB
iajs-512	42	7	)	)	PUNCT
iajs-512	42	8	2	2	NUM
iajs-512	42	9	with	with	ADP
iajs-512	42	10	photon	photon	NOUN
iajs-512	42	11	energy	energy	NOUN
iajs-512	42	12	(	(	PUNCT
iajs-512	42	13	ℎ𝑣	ℎ𝑣	PROPN
iajs-512	42	14	)	)	PUNCT
iajs-512	42	15	for	for	ADP
iajs-512	42	16	the	the	DET
iajs-512	42	17	zno	zno	NOUN
iajs-512	42	18	thin	thin	ADJ
iajs-512	42	19	film	film	NOUN
iajs-512	42	20	is	be	AUX
iajs-512	42	21	shown	show	VERB
iajs-512	42	22	in	in	ADP
iajs-512	42	23	fig	fig	NOUN
iajs-512	42	24	.	.	PUNCT
iajs-512	43	1	(	(	PUNCT
iajs-512	43	2	4	4	NUM
iajs-512	43	3	)	)	PUNCT
iajs-512	43	4	.	.	PUNCT
iajs-512	44	1	it	it	PRON
iajs-512	44	2	has	have	AUX
iajs-512	44	3	been	be	AUX
iajs-512	44	4	observed	observe	VERB
iajs-512	44	5	that	that	SCONJ
iajs-512	44	6	plots	plot	NOUN
iajs-512	44	7	of	of	ADP
iajs-512	44	8	(	(	PUNCT
iajs-512	44	9	∝	∝	PROPN
iajs-512	44	10	ℎ𝑣	ℎ𝑣	VERB
iajs-512	44	11	)	)	PUNCT
iajs-512	44	12	2	2	NUM
iajs-512	44	13	versus	versus	X
iajs-512	44	14	ℎ𝑣	ℎ𝑣	NOUN
iajs-512	44	15	are	be	AUX
iajs-512	44	16	linear	linear	ADJ
iajs-512	44	17	over	over	ADP
iajs-512	44	18	a	a	DET
iajs-512	44	19	wide	wide	ADJ
iajs-512	44	20	range	range	NOUN
iajs-512	44	21	of	of	ADP
iajs-512	44	22	photon	photon	NOUN
iajs-512	44	23	energies	energy	NOUN
iajs-512	44	24	indicating	indicate	VERB
iajs-512	44	25	the	the	DET
iajs-512	44	26	direct	direct	ADJ
iajs-512	44	27	type	type	NOUN
iajs-512	44	28	of	of	ADP
iajs-512	44	29	transitions	transition	NOUN
iajs-512	44	30	[	[	X
iajs-512	44	31	7	7	NUM
iajs-512	44	32	]	]	PUNCT
iajs-512	44	33	.	.	PUNCT
iajs-512	45	1	the	the	DET
iajs-512	45	2	optical	optical	ADJ
iajs-512	45	3	band	band	NOUN
iajs-512	45	4	gap	gap	NOUN
iajs-512	45	5	of	of	ADP
iajs-512	45	6	zno	zno	NOUN
iajs-512	45	7	films	film	NOUN
iajs-512	45	8	increases	increase	VERB
iajs-512	45	9	from	from	ADP
iajs-512	45	10	(	(	PUNCT
iajs-512	45	11	3.0	3.0	NUM
iajs-512	45	12	to	to	PART
iajs-512	45	13	3.2	3.2	NUM
iajs-512	45	14	)	)	PUNCT
iajs-512	45	15	ev	ev	NOUN
iajs-512	45	16	with	with	ADP
iajs-512	45	17	the	the	DET
iajs-512	45	18	increase	increase	NOUN
iajs-512	45	19	of	of	ADP
iajs-512	45	20	oxygen	oxygen	NOUN
iajs-512	45	21	gas	gas	NOUN
iajs-512	45	22	flow	flow	NOUN
iajs-512	45	23	rate	rate	NOUN
iajs-512	45	24	because	because	SCONJ
iajs-512	45	25	of	of	ADP
iajs-512	45	26	increase	increase	NOUN
iajs-512	45	27	crystallinity	crystallinity	NOUN
iajs-512	45	28	material	material	NOUN
iajs-512	45	29	and	and	CCONJ
iajs-512	45	30	decreased	decrease	VERB
iajs-512	45	31	crystalline	crystalline	NOUN
iajs-512	45	32	defect	defect	NOUN
iajs-512	45	33	,	,	PUNCT
iajs-512	45	34	so	so	SCONJ
iajs-512	45	35	position	position	NOUN
iajs-512	45	36	levels	level	NOUN
iajs-512	45	37	reduced	reduce	VERB
iajs-512	45	38	near	near	ADP
iajs-512	45	39	valance	valance	NOUN
iajs-512	45	40	and	and	CCONJ
iajs-512	45	41	conduction	conduction	NOUN
iajs-512	45	42	bands	band	NOUN
iajs-512	45	43	.	.	PUNCT
iajs-512	46	1	the	the	DET
iajs-512	46	2	refractive	refractive	ADJ
iajs-512	46	3	index	index	NOUN
iajs-512	46	4	is	be	AUX
iajs-512	46	5	an	an	DET
iajs-512	46	6	important	important	ADJ
iajs-512	46	7	parameter	parameter	NOUN
iajs-512	46	8	for	for	ADP
iajs-512	46	9	optical	optical	ADJ
iajs-512	46	10	materials	material	NOUN
iajs-512	46	11	and	and	CCONJ
iajs-512	46	12	application	application	NOUN
iajs-512	46	13	,	,	PUNCT
iajs-512	46	14	thus	thus	ADV
iajs-512	46	15	,	,	PUNCT
iajs-512	46	16	it	it	PRON
iajs-512	46	17	is	be	AUX
iajs-512	46	18	important	important	ADJ
iajs-512	46	19	to	to	PART
iajs-512	46	20	determine	determine	VERB
iajs-512	46	21	optical	optical	ADJ
iajs-512	46	22	constants	constant	NOUN
iajs-512	46	23	of	of	ADP
iajs-512	46	24	the	the	DET
iajs-512	46	25	films	film	NOUN
iajs-512	46	26	.	.	PUNCT
iajs-512	47	1	the	the	DET
iajs-512	47	2	refractive	refractive	ADJ
iajs-512	47	3	index	index	NOUN
iajs-512	47	4	of	of	ADP
iajs-512	47	5	the	the	DET
iajs-512	47	6	films	film	NOUN
iajs-512	47	7	was	be	AUX
iajs-512	47	8	determined	determine	VERB
iajs-512	47	9	from	from	ADP
iajs-512	47	10	the	the	DET
iajs-512	47	11	following	follow	VERB
iajs-512	47	12	relation	relation	NOUN
iajs-512	47	13	[	[	X
iajs-512	47	14	8	8	NUM
iajs-512	47	15	]	]	X
iajs-512	47	16	:	:	PUNCT
iajs-512	47	17	𝑛	𝑛	ADP
iajs-512	47	18	=	=	PUNCT
iajs-512	48	1	1+𝑅	1+𝑅	NUM
iajs-512	48	2	1−𝑅	1−𝑅	NUM
iajs-512	49	1	+	+	CCONJ
iajs-512	49	2	�	�	PROPN
iajs-512	49	3	4𝑅	4𝑅	PROPN
iajs-512	49	4	(	(	PUNCT
iajs-512	49	5	1−𝑅)2	1−𝑅)2	NUM
iajs-512	49	6	−	−	NOUN
iajs-512	49	7	𝐾2	𝐾2	NOUN
iajs-512	49	8	…	…	PUNCT
iajs-512	49	9	…	…	PUNCT
iajs-512	49	10	…	…	PUNCT
iajs-512	49	11	…	…	PUNCT
iajs-512	49	12	…	…	PUNCT
iajs-512	49	13	…	…	PUNCT
iajs-512	49	14	…	…	PUNCT
iajs-512	49	15	..	..	PUNCT
iajs-512	49	16	(	(	PUNCT
iajs-512	49	17	4	4	NUM
iajs-512	49	18	)	)	PUNCT
iajs-512	49	19	where	where	SCONJ
iajs-512	49	20	r	r	NOUN
iajs-512	49	21	is	be	AUX
iajs-512	49	22	the	the	DET
iajs-512	49	23	reflection	reflection	NOUN
iajs-512	49	24	,	,	PUNCT
iajs-512	49	25	and	and	CCONJ
iajs-512	49	26	k	k	PROPN
iajs-512	49	27	is	be	AUX
iajs-512	49	28	the	the	DET
iajs-512	49	29	extinction	extinction	NOUN
iajs-512	49	30	coefficient	coefficient	NOUN
iajs-512	49	31	.	.	PUNCT
iajs-512	50	1	the	the	DET
iajs-512	50	2	extinction	extinction	NOUN
iajs-512	50	3	coefficient	coefficient	NOUN
iajs-512	50	4	can	can	AUX
iajs-512	50	5	be	be	AUX
iajs-512	50	6	obtained	obtain	VERB
iajs-512	50	7	from	from	ADP
iajs-512	50	8	the	the	DET
iajs-512	50	9	experimental	experimental	ADJ
iajs-512	50	10	expression	expression	NOUN
iajs-512	50	11	[	[	X
iajs-512	50	12	7	7	NUM
iajs-512	50	13	]	]	SYM
iajs-512	50	14	:	:	PUNCT
iajs-512	50	15	𝐾	𝐾	PROPN
iajs-512	50	16	=	=	SYM
iajs-512	50	17	∝𝜆	∝𝜆	X
iajs-512	50	18	4𝜋	4𝜋	NOUN
iajs-512	50	19	…	…	PUNCT
iajs-512	50	20	…	…	PUNCT
iajs-512	50	21	…	…	PUNCT
iajs-512	50	22	…	…	PUNCT
iajs-512	50	23	…	…	PUNCT
iajs-512	50	24	…	…	PUNCT
iajs-512	50	25	…	…	SYM
iajs-512	50	26	.(5	.(5	NOUN
iajs-512	50	27	)	)	PUNCT
iajs-512	50	28	where	where	SCONJ
iajs-512	50	29	λ	λ	PROPN
iajs-512	50	30	is	be	AUX
iajs-512	50	31	the	the	DET
iajs-512	50	32	wave	wave	NOUN
iajs-512	50	33	length	length	NOUN
iajs-512	50	34	.	.	PUNCT
iajs-512	51	1	from	from	ADP
iajs-512	51	2	fig.(5	fig.(5	PROPN
iajs-512	51	3	)	)	PUNCT
iajs-512	51	4	,	,	PUNCT
iajs-512	51	5	the	the	DET
iajs-512	51	6	films	film	NOUN
iajs-512	51	7	show	show	VERB
iajs-512	51	8	that	that	SCONJ
iajs-512	51	9	the	the	DET
iajs-512	51	10	refractive	refractive	ADJ
iajs-512	51	11	index	index	NOUN
iajs-512	51	12	values	value	NOUN
iajs-512	51	13	decrease	decrease	VERB
iajs-512	51	14	with	with	ADP
iajs-512	51	15	the	the	DET
iajs-512	51	16	increase	increase	NOUN
iajs-512	51	17	of	of	ADP
iajs-512	51	18	flow	flow	NOUN
iajs-512	51	19	rate	rate	NOUN
iajs-512	51	20	oxygen	oxygen	NOUN
iajs-512	51	21	.	.	PUNCT
iajs-512	52	1	the	the	DET
iajs-512	52	2	extinction	extinction	NOUN
iajs-512	52	3	coefficient	coefficient	NOUN
iajs-512	52	4	dependence	dependence	NOUN
iajs-512	52	5	on	on	ADP
iajs-512	52	6	wavelength	wavelength	NOUN
iajs-512	52	7	is	be	AUX
iajs-512	52	8	shown	show	VERB
iajs-512	52	9	in	in	ADP
iajs-512	52	10	fig.(6	fig.(6	PROPN
iajs-512	52	11	)	)	PUNCT
iajs-512	52	12	,	,	PUNCT
iajs-512	52	13	where	where	SCONJ
iajs-512	52	14	it	it	PRON
iajs-512	52	15	is	be	AUX
iajs-512	52	16	decreased	decrease	VERB
iajs-512	52	17	with	with	ADP
iajs-512	52	18	the	the	DET
iajs-512	52	19	increase	increase	NOUN
iajs-512	52	20	of	of	ADP
iajs-512	52	21	flow	flow	NOUN
iajs-512	52	22	rate	rate	NOUN
iajs-512	52	23	oxygen	oxygen	NOUN
iajs-512	52	24	.	.	PUNCT
iajs-512	53	1	conclusions	conclusion	NOUN
iajs-512	53	2	we	we	PRON
iajs-512	53	3	have	have	AUX
iajs-512	53	4	deposited	deposit	VERB
iajs-512	53	5	zno	zno	NOUN
iajs-512	53	6	thin	thin	ADJ
iajs-512	53	7	films	film	NOUN
iajs-512	53	8	on	on	ADP
iajs-512	53	9	glass	glass	NOUN
iajs-512	53	10	substrate	substrate	NOUN
iajs-512	53	11	using	use	VERB
iajs-512	53	12	thermal	thermal	ADJ
iajs-512	53	13	evaporation	evaporation	NOUN
iajs-512	53	14	technique	technique	NOUN
iajs-512	53	15	at	at	ADP
iajs-512	53	16	different	different	ADJ
iajs-512	53	17	oxygen	oxygen	NOUN
iajs-512	53	18	flow	flow	NOUN
iajs-512	53	19	rates	rate	NOUN
iajs-512	53	20	at	at	ADP
iajs-512	53	21	200	200	NUM
iajs-512	53	22	℃	℃	PROPN
iajs-512	53	23	.	.	PUNCT
iajs-512	54	1	the	the	DET
iajs-512	54	2	xrd	xrd	PROPN
iajs-512	54	3	measurement	measurement	PROPN
iajs-512	54	4	showed	show	VERB
iajs-512	54	5	the	the	DET
iajs-512	54	6	intensity	intensity	NOUN
iajs-512	54	7	of	of	ADP
iajs-512	54	8	zno	zno	NOUN
iajs-512	54	9	films	film	NOUN
iajs-512	54	10	increase	increase	VERB
iajs-512	54	11	with	with	ADP
iajs-512	54	12	the	the	DET
iajs-512	54	13	increase	increase	NOUN
iajs-512	54	14	of	of	ADP
iajs-512	54	15	oxygen	oxygen	NOUN
iajs-512	54	16	gas	gas	NOUN
iajs-512	54	17	flow	flow	NOUN
iajs-512	54	18	.	.	PUNCT
iajs-512	55	1	the	the	DET
iajs-512	55	2	tensile	tensile	NOUN
iajs-512	55	3	stress	stress	NOUN
iajs-512	55	4	along	along	ADP
iajs-512	55	5	the	the	DET
iajs-512	55	6	c	c	NOUN
iajs-512	55	7	-	-	PUNCT
iajs-512	55	8	axis	axis	NOUN
iajs-512	55	9	in	in	ADP
iajs-512	55	10	the	the	DET
iajs-512	55	11	as	as	ADP
iajs-512	55	12	–	–	PUNCT
iajs-512	55	13	grown	grow	VERB
iajs-512	55	14	thin	thin	ADJ
iajs-512	55	15	film	film	NOUN
iajs-512	55	16	attributed	attribute	VERB
iajs-512	55	17	to	to	ADP
iajs-512	55	18	the	the	DET
iajs-512	55	19	common	common	ADJ
iajs-512	55	20	effect	effect	NOUN
iajs-512	55	21	of	of	ADP
iajs-512	55	22	amorphous	amorphous	ADJ
iajs-512	55	23	substrate	substrate	NOUN
iajs-512	55	24	and	and	CCONJ
iajs-512	55	25	extruding	extruding	NOUN
iajs-512	55	26	between	between	ADP
iajs-512	55	27	grains	grain	NOUN
iajs-512	55	28	.	.	PUNCT
iajs-512	56	1	the	the	DET
iajs-512	56	2	optical	optical	ADJ
iajs-512	56	3	transmittance	transmittance	NOUN
iajs-512	56	4	is	be	AUX
iajs-512	56	5	80	80	NUM
iajs-512	56	6	%	%	NOUN
iajs-512	56	7	at	at	ADP
iajs-512	56	8	flow	flow	NOUN
iajs-512	56	9	1.5	1.5	NUM
iajs-512	56	10	litter	litter	NOUN
iajs-512	56	11	/	/	SYM
iajs-512	56	12	min	min	NOUN
iajs-512	56	13	.	.	PROPN
iajs-512	56	14	,	,	PUNCT
iajs-512	56	15	and	and	CCONJ
iajs-512	56	16	a	a	DET
iajs-512	56	17	value	value	NOUN
iajs-512	56	18	of	of	ADP
iajs-512	56	19	about	about	ADV
iajs-512	56	20	3.2	3.2	NUM
iajs-512	56	21	ev	ev	INTJ
iajs-512	56	22	for	for	ADP
iajs-512	56	23	the	the	DET
iajs-512	56	24	optical	optical	ADJ
iajs-512	56	25	band	band	NOUN
iajs-512	56	26	gap	gap	NOUN
iajs-512	56	27	at	at	ADP
iajs-512	56	28	flow	flow	NOUN
iajs-512	56	29	rate	rate	NOUN
iajs-512	56	30	1.5	1.5	NUM
iajs-512	56	31	litter	litter	NOUN
iajs-512	56	32	/	/	SYM
iajs-512	56	33	min	min	NOUN
iajs-512	56	34	.	.	PROPN
iajs-512	56	35	.	.	PUNCT
iajs-512	57	1	these	these	DET
iajs-512	57	2	behaviors	behavior	NOUN
iajs-512	57	3	are	be	AUX
iajs-512	57	4	comparable	comparable	ADJ
iajs-512	57	5	with	with	ADP
iajs-512	57	6	those	those	PRON
iajs-512	57	7	of	of	ADP
iajs-512	57	8	zno	zno	NOUN
iajs-512	57	9	films	film	NOUN
iajs-512	57	10	grown	grow	VERB
iajs-512	57	11	by	by	ADP
iajs-512	57	12	other	other	ADJ
iajs-512	57	13	preparation	preparation	NOUN
iajs-512	57	14	techniques	technique	NOUN
iajs-512	57	15	,	,	PUNCT
iajs-512	57	16	and	and	CCONJ
iajs-512	57	17	it	it	PRON
iajs-512	57	18	may	may	AUX
iajs-512	57	19	be	be	AUX
iajs-512	57	20	considered	consider	VERB
iajs-512	57	21	that	that	SCONJ
iajs-512	57	22	the	the	DET
iajs-512	57	23	deposited	deposit	VERB
iajs-512	57	24	crystalline	crystalline	NOUN
iajs-512	57	25	zno	zno	NOUN
iajs-512	57	26	thin	thin	ADJ
iajs-512	57	27	film	film	NOUN
iajs-512	57	28	was	be	AUX
iajs-512	57	29	suitable	suitable	ADJ
iajs-512	57	30	for	for	ADP
iajs-512	57	31	many	many	ADJ
iajs-512	57	32	optical	optical	ADJ
iajs-512	57	33	devices	device	NOUN
iajs-512	57	34	,	,	PUNCT
iajs-512	57	35	such	such	ADJ
iajs-512	57	36	as	as	ADP
iajs-512	57	37	solar	solar	ADJ
iajs-512	57	38	cells	cell	NOUN
iajs-512	57	39	and	and	CCONJ
iajs-512	57	40	electrodes	electrode	NOUN
iajs-512	57	41	.	.	PUNCT
iajs-512	58	1	references	reference	NOUN
iajs-512	58	2	1	1	NUM
iajs-512	58	3	-	-	PUNCT
iajs-512	58	4	lupan	lupan	NOUN
iajs-512	58	5	,	,	PUNCT
iajs-512	58	6	o.	o.	PROPN
iajs-512	58	7	;	;	PUNCT
iajs-512	58	8	shishyanu	shishyanu	NOUN
iajs-512	58	9	,	,	PUNCT
iajs-512	58	10	s.	s.	PROPN
iajs-512	58	11	;	;	PUNCT
iajs-512	58	12	ursaki	ursaki	PROPN
iajs-512	58	13	,	,	PUNCT
iajs-512	58	14	v.	v.	PROPN
iajs-512	58	15	;	;	PUNCT
iajs-512	58	16	khalf	khalf	PROPN
iajs-512	58	17	,	,	PUNCT
iajs-512	58	18	h.	h.	PROPN
iajs-512	58	19	;	;	PUNCT
iajs-512	58	20	chow	chow	PROPN
iajs-512	58	21	,	,	PUNCT
iajs-512	58	22	l.	l.	PROPN
iajs-512	58	23	;	;	PUNCT
iajs-512	58	24	monanic	monanic	NOUN
iajs-512	58	25	,	,	PUNCT
iajs-512	58	26	e.	e.	PROPN
iajs-512	58	27	;	;	PUNCT
iajs-512	58	28	and	and	CCONJ
iajs-512	58	29	railean	railean	ADJ
iajs-512	58	30	,	,	PUNCT
iajs-512	58	31	s.	s.	PROPN
iajs-512	58	32	,	,	PUNCT
iajs-512	58	33	(	(	PUNCT
iajs-512	58	34	2009	2009	NUM
iajs-512	58	35	)	)	PUNCT
iajs-512	58	36	,	,	PUNCT
iajs-512	58	37	synthesis	synthesis	NOUN
iajs-512	58	38	of	of	ADP
iajs-512	58	39	nanostructure	nanostructure	PROPN
iajs-512	58	40	al	al	PROPN
iajs-512	58	41	-	-	PUNCT
iajs-512	58	42	doped	dope	VERB
iajs-512	58	43	zinc	zinc	NOUN
iajs-512	58	44	oxide	oxide	NOUN
iajs-512	58	45	films	film	NOUN
iajs-512	58	46	on	on	ADP
iajs-512	58	47	si	si	X
iajs-512	58	48	for	for	ADP
iajs-512	58	49	solar	solar	ADJ
iajs-512	58	50	cells	cell	NOUN
iajs-512	58	51	application	application	NOUN
iajs-512	58	52	,	,	PUNCT
iajs-512	58	53	j.	j.	PROPN
iajs-512	58	54	solar	solar	ADJ
iajs-512	58	55	energy	energy	NOUN
iajs-512	58	56	materials	material	NOUN
iajs-512	58	57	and	and	CCONJ
iajs-512	58	58	solar	solar	ADJ
iajs-512	58	59	cells	cell	NOUN
iajs-512	58	60	,	,	PUNCT
iajs-512	58	61	93	93	NUM
iajs-512	58	62	:	:	SYM
iajs-512	58	63	1417	1417	NUM
iajs-512	58	64	-	-	SYM
iajs-512	58	65	1422	1422	NUM
iajs-512	58	66	.	.	PUNCT
iajs-512	59	1	139	139	NUM
iajs-512	59	2	|	|	NOUN
iajs-512	59	3	physics	physics	NOUN
iajs-512	59	4	@1a@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@úó‘ój	@1a@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@úó‘ój	PROPN
iajs-512	59	5	�	�	PROPN
iajs-512	59	6	n€a@î@úœäñ€a@‚ï‹»‹€@·ró	n€a@î@úœäñ€a@‚ï‹»‹€@·ró	NUM
iajs-512	59	7	:	:	PUNCT
iajs-512	59	8	a@âig@ú‹	a@âig@ú‹	PROPN
iajs-512	59	9	©	©	PROPN
iajs-512	59	10	@ü‹26@@öü»€a@i1@‚b«@h2013	@ü‹26@@öü»€a@i1@‚b«@h2013	PROPN
iajs-512	59	11	ibn	ibn	PROPN
iajs-512	59	12	al	al	PROPN
iajs-512	59	13	-	-	PUNCT
iajs-512	59	14	haitham	haitham	PROPN
iajs-512	59	15	jour	jour	X
iajs-512	59	16	.	.	PROPN
iajs-512	60	1	for	for	ADP
iajs-512	60	2	pure	pure	ADJ
iajs-512	60	3	&	&	CCONJ
iajs-512	60	4	appl	appl	PROPN
iajs-512	60	5	.	.	PUNCT
iajs-512	61	1	sci	sci	PROPN
iajs-512	61	2	.	.	PUNCT
iajs-512	61	3	vol	vol	NOUN
iajs-512	61	4	.	.	PROPN
iajs-512	62	1	26	26	NUM
iajs-512	62	2	(	(	PUNCT
iajs-512	62	3	1	1	NUM
iajs-512	62	4	)	)	PUNCT
iajs-512	62	5	2013	2013	NUM
iajs-512	62	6	2suchristou	2suchristou	NUM
iajs-512	62	7	,	,	PUNCT
iajs-512	62	8	m.	m.	NOUN
iajs-512	62	9	;	;	PUNCT
iajs-512	62	10	katharakis	katharaki	NOUN
iajs-512	62	11	,	,	PUNCT
iajs-512	62	12	m.	m.	NOUN
iajs-512	62	13	and	and	CCONJ
iajs-512	62	14	koudoumas	koudouma	NOUN
iajs-512	62	15	,	,	PUNCT
iajs-512	62	16	e.	e.	PROPN
iajs-512	62	17	(	(	PUNCT
iajs-512	62	18	2007	2007	NUM
iajs-512	62	19	)	)	PUNCT
iajs-512	62	20	,	,	PUNCT
iajs-512	62	21	substrate	substrate	NOUN
iajs-512	62	22	temperature	temperature	NOUN
iajs-512	62	23	influence	influence	NOUN
iajs-512	62	24	on	on	ADP
iajs-512	62	25	the	the	DET
iajs-512	62	26	properties	property	NOUN
iajs-512	62	27	of	of	ADP
iajs-512	62	28	nanostructured	nanostructure	VERB
iajs-512	62	29	zno	zno	NOUN
iajs-512	62	30	transparent	transparent	ADJ
iajs-512	62	31	ultrathin	ultrathin	NOUN
iajs-512	62	32	films	film	NOUN
iajs-512	62	33	grown	grow	VERB
iajs-512	62	34	by	by	ADP
iajs-512	62	35	pld	pld	PROPN
iajs-512	62	36	,	,	PUNCT
iajs-512	62	37	j.	j.	PROPN
iajs-512	62	38	science	science	PROPN
iajs-512	62	39	direct	direct	ADJ
iajs-512	62	40	,	,	PUNCT
iajs-512	62	41	253	253	NUM
iajs-512	62	42	:	:	PUNCT
iajs-512	62	43	8141	8141	NUM
iajs-512	62	44	-	-	SYM
iajs-512	62	45	8145	8145	NUM
iajs-512	62	46	.	.	PUNCT
iajs-512	63	1	3	3	NUM
iajs-512	63	2	zhao	zhao	PROPN
iajs-512	63	3	,	,	PUNCT
iajs-512	63	4	l.	l.	PROPN
iajs-512	63	5	;	;	PUNCT
iajs-512	63	6	liu	liu	PROPN
iajs-512	63	7	,	,	PUNCT
iajs-512	63	8	j.	j.	PROPN
iajs-512	63	9	;	;	PUNCT
iajs-512	63	10	and	and	CCONJ
iajs-512	63	11	jiang	jiang	PROPN
iajs-512	63	12	,	,	PUNCT
iajs-512	63	13	q.	q.	PROPN
iajs-512	63	14	;	;	PUNCT
iajs-512	63	15	(	(	PUNCT
iajs-512	63	16	2006	2006	NUM
iajs-512	63	17	)	)	PUNCT
iajs-512	63	18	,	,	PUNCT
iajs-512	63	19	structural	structural	ADJ
iajs-512	63	20	and	and	CCONJ
iajs-512	63	21	optical	optical	ADJ
iajs-512	63	22	properties	property	NOUN
iajs-512	63	23	of	of	ADP
iajs-512	63	24	zno	zno	NOUN
iajs-512	63	25	thin	thin	PROPN
iajs-512	63	26	films	film	NOUN
iajs-512	63	27	deposited	deposit	VERB
iajs-512	63	28	on	on	ADP
iajs-512	63	29	quartz	quartz	NOUN
iajs-512	63	30	glass	glass	NOUN
iajs-512	63	31	by	by	ADP
iajs-512	63	32	pulsed	pulse	VERB
iajs-512	63	33	laser	laser	NOUN
iajs-512	63	34	deposition	deposition	NOUN
iajs-512	63	35	,	,	PUNCT
iajs-512	63	36	j.	j.	PROPN
iajs-512	63	37	science	science	PROPN
iajs-512	63	38	direct	direct	PROPN
iajs-512	63	39	,	,	PUNCT
iajs-512	63	40	252	252	NUM
iajs-512	63	41	:	:	SYM
iajs-512	63	42	84518455	84518455	NUM
iajs-512	63	43	.	.	PUNCT
iajs-512	64	1	4	4	NUM
iajs-512	64	2	rusu	rusu	PROPN
iajs-512	64	3	,	,	PUNCT
iajs-512	64	4	g.	g.	PROPN
iajs-512	64	5	;	;	PUNCT
iajs-512	64	6	girtan	girtan	NOUN
iajs-512	64	7	,	,	PUNCT
iajs-512	64	8	m.	m.	NOUN
iajs-512	64	9	and	and	CCONJ
iajs-512	64	10	rusu	rusu	PROPN
iajs-512	64	11	,	,	PUNCT
iajs-512	64	12	m.	m.	NOUN
iajs-512	64	13	,	,	PUNCT
iajs-512	64	14	(	(	PUNCT
iajs-512	64	15	2007	2007	NUM
iajs-512	64	16	)	)	PUNCT
iajs-512	64	17	,	,	PUNCT
iajs-512	64	18	preparation	preparation	NOUN
iajs-512	64	19	and	and	CCONJ
iajs-512	64	20	characterization	characterization	NOUN
iajs-512	64	21	of	of	ADP
iajs-512	64	22	zno	zno	NOUN
iajs-512	64	23	thin	thin	PROPN
iajs-512	64	24	films	film	NOUN
iajs-512	64	25	prepared	prepare	VERB
iajs-512	64	26	by	by	ADP
iajs-512	64	27	thermal	thermal	ADJ
iajs-512	64	28	oxidation	oxidation	NOUN
iajs-512	64	29	of	of	ADP
iajs-512	64	30	evaporated	evaporate	VERB
iajs-512	64	31	zn	zn	PROPN
iajs-512	64	32	thin	thin	PROPN
iajs-512	64	33	films	film	NOUN
iajs-512	64	34	,	,	PUNCT
iajs-512	64	35	j.	j.	PROPN
iajs-512	64	36	science	science	PROPN
iajs-512	64	37	direct	direct	PROPN
iajs-512	64	38	,	,	PUNCT
iajs-512	64	39	42	42	NUM
iajs-512	64	40	:	:	SYM
iajs-512	64	41	116122	116122	NUM
iajs-512	64	42	.	.	X
iajs-512	65	1	5	5	NUM
iajs-512	65	2	li	li	PROPN
iajs-512	65	3	,	,	PUNCT
iajs-512	65	4	c.	c.	PROPN
iajs-512	65	5	;	;	PUNCT
iajs-512	65	6	li	li	PROPN
iajs-512	65	7	,	,	PUNCT
iajs-512	65	8	x.	x.	PROPN
iajs-512	65	9	;	;	PUNCT
iajs-512	65	10	yan	yan	PROPN
iajs-512	65	11	,	,	PUNCT
iajs-512	65	12	p.	p.	PROPN
iajs-512	65	13	;	;	PUNCT
iajs-512	65	14	liu	liu	PROPN
iajs-512	65	15	,	,	PUNCT
iajs-512	65	16	y.	y.	PROPN
iajs-512	65	17	;	;	PUNCT
iajs-512	65	18	and	and	CCONJ
iajs-512	65	19	fan	fan	NOUN
iajs-512	65	20	,	,	PUNCT
iajs-512	65	21	x.	x.	NOUN
iajs-512	65	22	(	(	PUNCT
iajs-512	65	23	2007	2007	NUM
iajs-512	65	24	)	)	PUNCT
iajs-512	65	25	,	,	PUNCT
iajs-512	65	26	research	research	NOUN
iajs-512	65	27	on	on	ADP
iajs-512	65	28	the	the	DET
iajs-512	65	29	properties	property	NOUN
iajs-512	65	30	of	of	ADP
iajs-512	65	31	zno	zno	NOUN
iajs-512	65	32	thin	thin	PROPN
iajs-512	65	33	films	film	NOUN
iajs-512	65	34	deposited	deposit	VERB
iajs-512	65	35	by	by	ADP
iajs-512	65	36	using	use	VERB
iajs-512	65	37	filtered	filter	VERB
iajs-512	65	38	cathodic	cathodic	NOUN
iajs-512	65	39	arc	arc	NOUN
iajs-512	65	40	plasma	plasma	NOUN
iajs-512	65	41	technique	technique	NOUN
iajs-512	65	42	on	on	ADP
iajs-512	65	43	glass	glass	NOUN
iajs-512	65	44	substrate	substrate	NOUN
iajs-512	65	45	under	under	ADP
iajs-512	65	46	different	different	ADJ
iajs-512	65	47	flow	flow	NOUN
iajs-512	65	48	rate	rate	NOUN
iajs-512	65	49	of	of	ADP
iajs-512	65	50	o2	o2	PROPN
iajs-512	65	51	,	,	PUNCT
iajs-512	65	52	j.	j.	PROPN
iajs-512	65	53	science	science	PROPN
iajs-512	65	54	direct	direct	ADJ
iajs-512	65	55	,	,	PUNCT
iajs-512	65	56	253	253	NUM
iajs-512	65	57	:	:	SYM
iajs-512	65	58	4000	4000	NUM
iajs-512	65	59	-	-	SYM
iajs-512	65	60	4005	4005	NUM
iajs-512	65	61	.	.	PUNCT
iajs-512	66	1	6	6	NUM
iajs-512	66	2	yang	yang	PROPN
iajs-512	66	3	,	,	PUNCT
iajs-512	66	4	z.	z.	PROPN
iajs-512	66	5	;	;	PUNCT
iajs-512	66	6	lim	lim	PROPN
iajs-512	66	7	,	,	PUNCT
iajs-512	66	8	j.	j.	PROPN
iajs-512	66	9	;	;	PUNCT
iajs-512	66	10	chu	chu	PROPN
iajs-512	66	11	,	,	PUNCT
iajs-512	66	12	s.	s.	PROPN
iajs-512	66	13	;	;	PUNCT
iajs-512	66	14	zuo	zuo	PROPN
iajs-512	66	15	,	,	PUNCT
iajs-512	66	16	z.	z.	PROPN
iajs-512	66	17	and	and	CCONJ
iajs-512	66	18	liu	liu	PROPN
iajs-512	66	19	,	,	PUNCT
iajs-512	66	20	j.	j.	PROPN
iajs-512	66	21	,	,	PUNCT
iajs-512	66	22	(	(	PUNCT
iajs-512	66	23	2008	2008	NUM
iajs-512	66	24	)	)	PUNCT
iajs-512	66	25	,	,	PUNCT
iajs-512	66	26	study	study	NOUN
iajs-512	66	27	of	of	ADP
iajs-512	66	28	the	the	DET
iajs-512	66	29	effect	effect	NOUN
iajs-512	66	30	of	of	ADP
iajs-512	66	31	plasma	plasma	NOUN
iajs-512	66	32	power	power	NOUN
iajs-512	66	33	on	on	ADP
iajs-512	66	34	zno	zno	NOUN
iajs-512	66	35	thin	thin	PROPN
iajs-512	66	36	films	film	NOUN
iajs-512	66	37	growth	growth	NOUN
iajs-512	66	38	using	use	VERB
iajs-512	66	39	electron	electron	NOUN
iajs-512	66	40	cyclotron	cyclotron	NOUN
iajs-512	66	41	resonance	resonance	NOUN
iajs-512	66	42	plasma	plasma	NOUN
iajs-512	66	43	assisted	assist	VERB
iajs-512	66	44	molecular	molecular	ADJ
iajs-512	66	45	-	-	PUNCT
iajs-512	66	46	beam	beam	NOUN
iajs-512	66	47	epitaxy	epitaxy	NOUN
iajs-512	66	48	,	,	PUNCT
iajs-512	66	49	j.	j.	PROPN
iajs-512	66	50	applied	apply	VERB
iajs-512	66	51	surface	surface	NOUN
iajs-512	66	52	science	science	NOUN
iajs-512	66	53	,	,	PUNCT
iajs-512	66	54	255	255	NUM
iajs-512	66	55	:	:	PUNCT
iajs-512	66	56	3375	3375	NUM
iajs-512	66	57	-	-	SYM
iajs-512	66	58	3380	3380	NUM
iajs-512	66	59	.	.	PUNCT
iajs-512	67	1	7caglar	7caglar	NUM
iajs-512	67	2	,	,	PUNCT
iajs-512	67	3	m.	m.	NOUN
iajs-512	67	4	;	;	PUNCT
iajs-512	67	5	caglar	caglar	ADJ
iajs-512	67	6	,	,	PUNCT
iajs-512	67	7	y.	y.	PROPN
iajs-512	67	8	and	and	CCONJ
iajs-512	67	9	lican	lican	PROPN
iajs-512	67	10	,	,	PUNCT
iajs-512	67	11	s.	s.	PROPN
iajs-512	67	12	,	,	PUNCT
iajs-512	67	13	(	(	PUNCT
iajs-512	67	14	2006	2006	NUM
iajs-512	67	15	)	)	PUNCT
iajs-512	67	16	,	,	PUNCT
iajs-512	67	17	the	the	DET
iajs-512	67	18	determination	determination	NOUN
iajs-512	67	19	of	of	ADP
iajs-512	67	20	the	the	DET
iajs-512	67	21	thickness	thickness	NOUN
iajs-512	67	22	and	and	CCONJ
iajs-512	67	23	optical	optical	ADJ
iajs-512	67	24	constants	constant	NOUN
iajs-512	67	25	of	of	ADP
iajs-512	67	26	the	the	DET
iajs-512	67	27	zno	zno	NOUN
iajs-512	67	28	crystalline	crystalline	NOUN
iajs-512	67	29	thin	thin	ADJ
iajs-512	67	30	film	film	NOUN
iajs-512	67	31	by	by	ADP
iajs-512	67	32	using	use	VERB
iajs-512	67	33	envelope	envelope	NOUN
iajs-512	67	34	method	method	NOUN
iajs-512	67	35	,	,	PUNCT
iajs-512	67	36	j.	j.	PROPN
iajs-512	67	37	optoelectronics	optoelectronics	PROPN
iajs-512	67	38	and	and	CCONJ
iajs-512	67	39	advanced	advanced	ADJ
iajs-512	67	40	materials	material	NOUN
iajs-512	67	41	,	,	PUNCT
iajs-512	67	42	8(4	8(4	NUM
iajs-512	67	43	)	)	PUNCT
iajs-512	67	44	:	:	PUNCT
iajs-512	67	45	1410	1410	NUM
iajs-512	67	46	-	-	SYM
iajs-512	67	47	1413	1413	NUM
iajs-512	67	48	.	.	PUNCT
iajs-512	68	1	8akoy	8akoy	NUM
iajs-512	68	2	,	,	PUNCT
iajs-512	68	3	s.	s.	PROPN
iajs-512	68	4	;	;	PUNCT
iajs-512	68	5	caglare	caglare	PROPN
iajs-512	68	6	,	,	PUNCT
iajs-512	68	7	y.	y.	PROPN
iajs-512	68	8	;	;	PUNCT
iajs-512	68	9	ilican	ilican	PROPN
iajs-512	68	10	,	,	PUNCT
iajs-512	68	11	s.	s.	PROPN
iajs-512	68	12	and	and	CCONJ
iajs-512	68	13	caglar	caglar	ADJ
iajs-512	68	14	,	,	PUNCT
iajs-512	68	15	m.	m.	NOUN
iajs-512	68	16	(	(	PUNCT
iajs-512	68	17	2010	2010	NUM
iajs-512	68	18	)	)	PUNCT
iajs-512	68	19	effect	effect	NOUN
iajs-512	68	20	of	of	ADP
iajs-512	68	21	sn	sn	PROPN
iajs-512	68	22	dopants	dopant	NOUN
iajs-512	68	23	on	on	ADP
iajs-512	68	24	the	the	DET
iajs-512	68	25	optical	optical	ADJ
iajs-512	68	26	and	and	CCONJ
iajs-512	68	27	electrical	electrical	ADJ
iajs-512	68	28	properties	property	NOUN
iajs-512	68	29	of	of	ADP
iajs-512	68	30	zno	zno	NOUN
iajs-512	68	31	films	film	NOUN
iajs-512	68	32	,	,	PUNCT
iajs-512	68	33	j.	j.	PROPN
iajs-512	68	34	optical	optical	ADJ
iajs-512	68	35	application	application	NOUN
iajs-512	68	36	,	,	PUNCT
iajs-512	68	37	1	1	NUM
iajs-512	68	38	:	:	SYM
iajs-512	68	39	7	7	NUM
iajs-512	68	40	-	-	SYM
iajs-512	68	41	13	13	NUM
iajs-512	68	42	.	.	PUNCT
iajs-512	68	43	fig	fig	NOUN
iajs-512	68	44	.	.	PUNCT
iajs-512	69	1	(	(	PUNCT
iajs-512	69	2	1	1	NUM
iajs-512	69	3	):	):	PUNCT
iajs-512	69	4	xrd	xrd	NOUN
iajs-512	69	5	patterns	pattern	NOUN
iajs-512	69	6	of	of	ADP
iajs-512	69	7	zno	zno	PROPN
iajs-512	69	8	thin	thin	PROPN
iajs-512	69	9	films	film	NOUN
iajs-512	69	10	at	at	ADP
iajs-512	69	11	different	different	ADJ
iajs-512	69	12	flow	flow	NOUN
iajs-512	69	13	rates	rate	NOUN
iajs-512	69	14	of	of	ADP
iajs-512	69	15	o2	o2	PROPN
iajs-512	69	16	:	:	PUNCT
iajs-512	69	17	(	(	PUNCT
iajs-512	69	18	a	a	X
iajs-512	69	19	)	)	PUNCT
iajs-512	69	20	0.5	0.5	NUM
iajs-512	69	21	,	,	PUNCT
iajs-512	69	22	(	(	PUNCT
iajs-512	69	23	b	b	X
iajs-512	69	24	)	)	PUNCT
iajs-512	69	25	1.0	1.0	NUM
iajs-512	69	26	and	and	CCONJ
iajs-512	69	27	(	(	PUNCT
iajs-512	69	28	c	c	NOUN
iajs-512	69	29	)	)	PUNCT
iajs-512	69	30	1.5	1.5	NUM
iajs-512	69	31	litter	litter	NOUN
iajs-512	69	32	/min	/min	PUNCT
iajs-512	70	1	140	140	NUM
iajs-512	70	2	|	|	ADV
iajs-512	70	3	physics	physics	NOUN
iajs-512	70	4	@1a@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@úó‘ój	@1a@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@úó‘ój	PROPN
iajs-512	70	5	�	�	PROPN
iajs-512	70	6	n€a@î@úœäñ€a@‚ï‹»‹€@·ró	n€a@î@úœäñ€a@‚ï‹»‹€@·ró	NUM
iajs-512	70	7	:	:	PUNCT
iajs-512	70	8	a@âig@ú‹	a@âig@ú‹	PROPN
iajs-512	70	9	©	©	PROPN
iajs-512	70	10	@ü‹26@@öü»€a@i1@‚b«@h2013	@ü‹26@@öü»€a@i1@‚b«@h2013	PROPN
iajs-512	70	11	ibn	ibn	PROPN
iajs-512	70	12	al	al	PROPN
iajs-512	70	13	-	-	PUNCT
iajs-512	70	14	haitham	haitham	PROPN
iajs-512	70	15	jour	jour	X
iajs-512	70	16	.	.	PROPN
iajs-512	70	17	for	for	ADP
iajs-512	70	18	pure	pure	ADJ
iajs-512	70	19	&	&	CCONJ
iajs-512	70	20	appl	appl	PROPN
iajs-512	70	21	.	.	PUNCT
iajs-512	71	1	sci	sci	PROPN
iajs-512	71	2	.	.	PUNCT
iajs-512	71	3	vol	vol	NOUN
iajs-512	71	4	.	.	PROPN
iajs-512	72	1	26	26	NUM
iajs-512	72	2	(	(	PUNCT
iajs-512	72	3	1	1	NUM
iajs-512	72	4	)	)	PUNCT
iajs-512	72	5	2013	2013	NUM
iajs-512	72	6	fig.(2	fig.(2	NUM
iajs-512	72	7	):	):	PUNCT
iajs-512	72	8	stress	stress	NOUN
iajs-512	72	9	along	along	ADP
iajs-512	72	10	the	the	DET
iajs-512	72	11	c	c	NOUN
iajs-512	72	12	-	-	PUNCT
iajs-512	72	13	axis	axis	NOUN
iajs-512	72	14	for	for	ADP
iajs-512	72	15	zno	zno	NOUN
iajs-512	72	16	films	film	NOUN
iajs-512	72	17	as	as	ADP
iajs-512	72	18	a	a	DET
iajs-512	72	19	function	function	NOUN
iajs-512	72	20	of	of	ADP
iajs-512	72	21	the	the	DET
iajs-512	72	22	flow	flow	NOUN
iajs-512	72	23	rate	rate	NOUN
iajs-512	72	24	of	of	ADP
iajs-512	72	25	o2	o2	PROPN
iajs-512	72	26	fig.(3	fig.(3	PROPN
iajs-512	72	27	):	):	PUNCT
iajs-512	72	28	transmission	transmission	NOUN
iajs-512	72	29	spectra	spectra	NOUN
iajs-512	72	30	for	for	ADP
iajs-512	72	31	zno	zno	NOUN
iajs-512	72	32	films	film	NOUN
iajs-512	72	33	different	different	ADJ
iajs-512	72	34	flow	flow	NOUN
iajs-512	72	35	rat	rat	NOUN
iajs-512	72	36	of	of	ADP
iajs-512	72	37	oxygen	oxygen	NOUN
iajs-512	72	38	fig.(4	fig.(4	NOUN
iajs-512	72	39	):	):	PUNCT
iajs-512	72	40	optical	optical	ADJ
iajs-512	72	41	energy	energy	NOUN
iajs-512	72	42	for	for	ADP
iajs-512	72	43	zno	zno	NOUN
iajs-512	72	44	films	film	NOUN
iajs-512	72	45	at	at	ADP
iajs-512	72	46	different	different	ADJ
iajs-512	72	47	flow	flow	NOUN
iajs-512	72	48	rat	rat	NOUN
iajs-512	72	49	of	of	ADP
iajs-512	72	50	oxygen	oxygen	NOUN
iajs-512	72	51	fig.(5	fig.(5	NOUN
iajs-512	72	52	):	):	PUNCT
iajs-512	72	53	refractive	refractive	ADJ
iajs-512	72	54	index	index	NOUN
iajs-512	72	55	with	with	ADP
iajs-512	72	56	wave	wave	NOUN
iajs-512	72	57	length	length	NOUN
iajs-512	72	58	for	for	ADP
iajs-512	72	59	zno	zno	NOUN
iajs-512	72	60	films	film	NOUN
iajs-512	72	61	at	at	ADP
iajs-512	72	62	different	different	ADJ
iajs-512	72	63	flow	flow	NOUN
iajs-512	72	64	rate	rate	NOUN
iajs-512	72	65	of	of	ADP
iajs-512	72	66	oxygen	oxygen	NOUN
iajs-512	72	67	.	.	PUNCT
iajs-512	73	1	141	141	NUM
iajs-512	73	2	|	|	NOUN
iajs-512	73	3	physics	physics	NOUN
iajs-512	73	4	@1a@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@úó‘ój	@1a@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@úó‘ój	PROPN
iajs-512	73	5	�	�	PROPN
iajs-512	73	6	n€a@î@úœäñ€a@‚ï‹»‹€@·ró	n€a@î@úœäñ€a@‚ï‹»‹€@·ró	NUM
iajs-512	73	7	:	:	PUNCT
iajs-512	73	8	a@âig@ú‹	a@âig@ú‹	PROPN
iajs-512	73	9	©	©	PROPN
iajs-512	73	10	@ü‹26@@öü»€a@i1@‚b«@h2013	@ü‹26@@öü»€a@i1@‚b«@h2013	PROPN
iajs-512	73	11	ibn	ibn	PROPN
iajs-512	73	12	al	al	PROPN
iajs-512	73	13	-	-	PUNCT
iajs-512	73	14	haitham	haitham	PROPN
iajs-512	73	15	jour	jour	X
iajs-512	73	16	.	.	PROPN
iajs-512	73	17	for	for	ADP
iajs-512	73	18	pure	pure	ADJ
iajs-512	73	19	&	&	CCONJ
iajs-512	73	20	appl	appl	PROPN
iajs-512	73	21	.	.	PUNCT
iajs-512	74	1	sci	sci	PROPN
iajs-512	74	2	.	.	PUNCT
iajs-512	74	3	vol	vol	NOUN
iajs-512	74	4	.	.	PROPN
iajs-512	75	1	26	26	NUM
iajs-512	75	2	(	(	PUNCT
iajs-512	75	3	1	1	NUM
iajs-512	75	4	)	)	PUNCT
iajs-512	75	5	2013	2013	NUM
iajs-512	75	6	fig	fig	NOUN
iajs-512	75	7	.	.	PUNCT
iajs-512	76	1	(	(	PUNCT
iajs-512	76	2	6	6	NUM
iajs-512	76	3	):	):	PUNCT
iajs-512	76	4	extinction	extinction	NOUN
iajs-512	76	5	coefficient	coefficient	NOUN
iajs-512	76	6	with	with	ADP
iajs-512	76	7	wave	wave	NOUN
iajs-512	76	8	length	length	NOUN
iajs-512	76	9	for	for	ADP
iajs-512	76	10	zno	zno	NOUN
iajs-512	76	11	films	film	NOUN
iajs-512	76	12	at	at	ADP
iajs-512	76	13	different	different	ADJ
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iajs-512	83	19	المرسبة	المرسبة	NOUN
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iajs-512	89	2	االوكسجین	االوكسجین	VERB
iajs-512	89	3	وفجوة	وفجوة	ADV
iajs-512	90	1	الطاقة	الطاقة	PROPN
iajs-512	90	2	البصریة	البصریة	VERB
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iajs-512	90	4	تتراوح	تتراوح	PROPN
iajs-512	90	5	بین	بین	PROPN
iajs-512	90	6	بزیادة	بزیادة	PROPN
iajs-512	90	7	معدل	معدل	PROPN
iajs-512	90	8	تدفق	تدفق	X
iajs-512	90	9	االوكسجین	االوكسجین	VERB
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iajs-512	91	1	1.7الى	1.7الى	NUM
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iajs-512	92	5	،	،	PROPN
iajs-512	92	6	حیود	حیود	PROPN
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